Piezoelectric and mechanical properties of fatigue resistant, self-healing PZT-ionomer composites

Science.gov (United States)

James, N. K.; Lafont, U.; van der Zwaag, S.; Groen, W. A.

2014-05-01

Piezoelectric ceramic-polymer composites with 0-3 connectivity were fabricated using lead zirconium titanate (PZT) powder dispersed in an ionomer (Zn ionomer) and its reference ethylene methacrylic acid copolymer (EMAA) polymer matrix. The PZT-Zn ionomer and PZT-EMAA composites were prepared by melt extrusion followed by hot pressing. The effects of poling conditions such as temperature, time and electric field on the piezoelectric properties of the composites were investigated. The experimentally observed piezoelectric charge coefficient and dielectric constant of the composites were compared with theoretical models. The results show that PZT-Zn ionomer composites have better piezoelectric properties compared to PZT-EMAA composites. The static and fatigue properties of the composites were investigated. The PZT-Zn ionomer composites were found to have excellent fatigue resistance even at strain levels of 4%. Due to the self-healing capabilities of the ionomer matrix, the loss of piezoelectric properties after high strain tensile cyclic loading could be partially recovered by thermal healing.

Investigation of Top/bottom Electrode and Diffusion Barrier Layer for PZT thick film MEMS Sensors

DEFF Research Database (Denmark)

Pedersen, Thomas; Hindrichsen, Christian Carstensen; Lou-Møller, R.

2007-01-01

In this work screen printed piezoelectric Ferroperm PZ26 lead zirconate titanate (PZT) thick film is used for two MEMS devices. A test structure is used to investigate several aspects regarding bottom and top electrodes. 450 nm ZrO2 thin film is found to be an insufficient diffusion barrier layer...... for thick film PZT sintered at 850degC. E-beam evaporated Al and Pt is patterned on PZT with a lift-off process with a line width down to 3 mum. The roughness of the PZT is found to have a strong influence on the conductance of the top electrode....

Comparative face-shear piezoelectric properties of soft and hard PZT ceramics

Science.gov (United States)

Miao, Hongchen; Chen, Xi; Cai, Hairong; Li, Faxin

2015-12-01

The face-shear ( d 36 ) mode may be the most practical shear mode in piezoelectrics, while theoretically this mode cannot appear in piezoelectric ceramics because of its transversally isotropic symmetry. Recently, we realized piezoelectric coefficient d 36 up to 206pC/N in soft PbZr1-xTixO3 (PZT) ceramics via ferroelastic domain engineering [H. C. Miao and F. X. Li, Appl. Phys. Lett. 107, 122902 (2015)]. In this work, we further realized the face-shear mode in both hard and soft PZT ceramics including PZT-4 (hard), PZT-51(soft), and PZT-5H (soft) and investigated the electric properties systematically. The resonance methods are derived to measure the d 36 coefficients using both square patches and narrow bar samples, and the obtained values are consistent with that measured by a modified d 33 meter previously. For all samples, the pure d 36 mode can only appear near the resonance frequency, and the coupled d 36 - d 31 mode dominates off resonance. It is found that both the piezoelectric coefficient d 36 and the electromechanical coupling factor k 36 of soft PZT ceramics (PZT-5H and PZT-51) are considerably larger than those of the hard PZT ceramics (PZT-4). The obtained d 36 of 160-275pC/N, k 36 ˜ 0.24, and the mechanical quality factor Q 36 of 60-90 in soft PZT ceramics are comparable with the corresponding properties of the d 31 mode sample. Therefore, the d 36 mode in modified soft PZT ceramics is more promising for industrial applications such as face-shear resonators and shear horizontal wave generators.

PZT-5A4/PA and PZT-5A4/PDMS piezoelectric composite bimorphs

NARCIS (Netherlands)

Babu, I.; Hendrix, M.M.R.M.; With, de G.

2014-01-01

Disc type reinforced piezoelectric composite bimorphs with series connection were designed and the performance was investigated. The composite bimorphs (PZT/PA and PZT/PDMS (40/60 vol%)) were successfully fabricated by a compression molding and solution casting technique. The charge developed at an

Pb(Zr,Ti)O3-Pb(Mn1/3Nb2/3)O3 piezoelectric thick films by aerosol deposition

International Nuclear Information System (INIS)

Ryu, Jungho; Choi, Jong-Jin; Hahn, Byung-Dong; Yoon, Woon-Ha; Lee, Byoung-Kuk; Choi, Joon Hwan; Park, Dong-Soo

2010-01-01

Piezoelectric thick films of Pb(Zr,Ti)O 3 -Pb(Mn 1/3 Nb 2/3 )O 3 (PZT-PMnN) with Zr:Ti ratios ranging from 0.45:0.55 to 0.60:0.40 were fabricated on a platinized silicon wafer by aerosol deposition (AD). All the films were deposited with a thickness of 10 μm with high density. By adding PMnN to 57:43 PZT, a dielectric constant as low as ∼660 was achieved while the effective piezoelectric constant was over 140 pC/N. PZT-PMnN with a Zr:Ti ratio of 57:43 thus showed a maximum piezoelectric voltage constant (g 33 ) of 23.8 x 10 -3 Vm/N and is a good candidate for high quality thick films for application to high-energy density or high sensitivity, piezoelectric energy harvesters and sensors.

Piezoelectric Lead Zirconate Titanate (PZT) Ring Shaped Contour-Mode MEMS Resonators

Science.gov (United States)

Kasambe, P. V.; Asgaonkar, V. V.; Bangera, A. D.; Lokre, A. S.; Rathod, S. S.; Bhoir, D. V.

2018-02-01

Flexibility in setting fundamental frequency of resonator independent of its motional resistance is one of the desired criteria in micro-electromechanical (MEMS) resonator design. It is observed that ring-shaped piezoelectric contour-mode MEMS resonators satisfy this design criterion than in case of rectangular plate MEMS resonators. Also ring-shaped contour-mode piezoelectric MEMS resonator has an advantage that its fundamental frequency is defined by in-plane dimensions, but they show variation of fundamental frequency with different Platinum (Pt) thickness referred as change in ratio of fNEW /fO . This paper presents the effects of variation in geometrical parameters and change in piezoelectric material on the resonant frequencies of Platinum piezoelectric-Aluminium ring-shaped contour-mode MEMS resonators and its electrical parameters. The proposed structure with Lead Zirconate Titanate (PZT) as the piezoelectric material was observed to be a piezoelectric material with minimal change in fundamental resonant frequency due to Platinum thickness variation. This structure was also found to exhibit extremely low motional resistance of 0.03 Ω as compared to the 31-35 Ω range obtained when using AlN as the piezoelectric material. CoventorWare 10 is used for the design, simulation and corresponding analysis of resonators which is Finite Element Method (FEM) analysis and design tool for MEMS devices.

Piezoelectric and mechanical properties of structured PZT-epoxy composites

NARCIS (Netherlands)

James, N.K.; Ende, D.A. van den; Lafont, U.; Zwaag, S. van der; Groen, W.A.

2013-01-01

Structured lead zirconium titanate (PZT)-epoxy composites are prepared by dielectrophoresis. The piezoelectric and dielectric properties of the composites as a function of PZT volume fraction are investigated and compared with the corresponding unstructured composites. The effect of poling voltage

Nonlinear piezoelectricity in PZT ceramics for generating ultrasonic phase conjugate waves

Science.gov (United States)

Yamamoto; Kokubo; Sakai; Takagi

2000-03-01

We have succeeded in the generation of acoustic phase conjugate waves with nonlinear PZT piezoelectric ceramics and applied them to ultrasonic imaging systems. Our aim is to make a phase conjugator with 100% efficiency. For this purpose, it is important to clarify the mechanism of acoustic phase conjugation through nonlinear piezoelectricity. The process is explained by the parametric interaction via the third-order nonlinear piezoelectricity between the incident acoustic wave at angular frequency omega and the pump electric field at 2 omega. We solved the coupling equations including the third-ordered nonlinear piezoelectricity and theoretically derived the amplitude efficiency of the acoustic phase conjugation. We compared the efficiencies between the theoretical and experimental values for PZT ceramics with eight different compositions. Pb[(Zn1/3Nb2/3)(1 - x)Tix]O3 (X = 0.09, PZNT91/9) piezoelectric single crystals have been investigated for high-performance ultrasonic transducer application, because these have large piezoelectric constants, high electrical-mechanical coupling factors and high dielectric constants. We found that they have third-order nonlinear piezoelectric constants much larger than PZT and are hopeful that the material as a phase conjugator has over 100% efficiency.

Mechanical and electrical strain response of a piezoelectric auxetic PZT lattice structure

Science.gov (United States)

Fey, Tobias; Eichhorn, Franziska; Han, Guifang; Ebert, Kathrin; Wegener, Moritz; Roosen, Andreas; Kakimoto, Ken-ichi; Greil, Peter

2016-01-01

A two-dimensional auxetic lattice structure was fabricated from a PZT piezoceramic. Tape casted and sintered sheets with a thickness of 530 μm were laser cut into inverted honeycomb lattice structure with re-entrant cell geometry (θ = -25°) and poling direction oriented perpendicular to the lattice plane. The in-plane strain response upon applying an uniaxial compression load as well as an electric field perpendicular to the lattice plane were analyzed by a 2D image data detection analysis. The auxetic lattice structure exhibits orthotropic deformation behavior with a negative in-plane Poisson’s ratio of -2.05. Compared to PZT bulk material the piezoelectric auxetic lattice revealed a strain amplification by a factor of 30-70. Effective transversal coupling coefficients {{d}al}31 of the PZT lattice exceeding 4 × 103 pm V-1 were determined which result in an effective hydrostatic coefficient {{d}al}h 66 times larger than that of bulk PZT.

Mems-based pzt/pzt bimorph thick film vibration energy harvester

DEFF Research Database (Denmark)

Xu, Ruichao; Lei, Anders; Dahl-Petersen, Christian

2011-01-01

We describe fabrication and characterization of a significantly improved version of a MEMS-based PZT/PZT thick film bimorph vibration energy harvester with an integrated silicon proof mass. The main advantage of bimorph vibration energy harvesters is that strain energy is not lost in mechanical...... support materials since only PZT is strained, and thus it has a potential for significantly higher output power. An improved process scheme for the energy harvester resulted in a robust fabrication process with a record high fabrication yield of 98.6%. Moreover, the robust fabrication process allowed...... a high pressure treatment of the screen printed PZT thick films prior to sintering, improving the PZT thick film performance and harvester power output reaches 37.1 μW at 1 g....

Piezoelectric Resonance Investigation of Zr-rich PZT at Room Temperature

NARCIS (Netherlands)

Cereceda, N.; Noheda, B.; Fernandez-del-Castillo, J.R.; Gonzalo, J.A.; Frutos, J. De

1999-01-01

We study the piezoelectric resonances in poled PZT ceramics by means of a microscopic model. It connects the microscopic vibrations of the ionic units, cooperatively producing the piezoelectric effect, with the macroscopic piezoelectric parameters. The behaviour at the resonance is well described in

Properties of PZT-Based Piezoelectric Ceramics Between -150 and 250 C

Science.gov (United States)

Hooker, Matthew W.

1998-01-01

The properties of three PZT-based piezoelectric ceramics and one PLZT electrostrictive ceramic were measured as a function of temperature. In this work, the dielectric, ferroelectric polarization versus electric field, and piezoelectric properties of PZT-4, PZT-5A, PZT-5H, and PLZT-9/65/35 were measured over a temperature range of -150 to 250 C. In addition to these measurements, the relative thermal expansion of each composition was measured from 25 to 600 C and the modulus of rupture of each material was measured at room temperature. This report describes the experimental results and compares and contrasts the properties of these materials with respect to their applicability to intelligent aerospace systems.

Enhanced ferroelectric and piezoelectric properties in La-modified PZT ceramics

Science.gov (United States)

Kour, P.; Pradhan, S. K.; Kumar, Pawan; Sinha, S. K.; Kar, Manoranjan

2016-06-01

The effect of lanthanum (La) doping on ferroelectric and piezoelectric properties of lead zirconate titanate (PZT) sample has been investigated. Pb1- x La x Zr0.52Ti0.48O3 ceramics with x = 0.00, 0.02, 0.04, 0.06 and 0.10 were prepared by the sol-gel technique. Raman and Fourier transforms infrared spectroscopy have been employed to understand the structural modification due to ionic size mismatch. Raman spectra show the existence of both rhombohedral and tetragonal crystal symmetries. It also shows the dielectric relaxation with increase in La concentration in the sample. The increase in lattice strain due to La doping increases the remnant polarization and coercive field. The linear piezoelectric coefficient increases with the increase in La concentration. It reveals that La-substituted PZT is a better candidate for piezoelectric sensor applications as compared to that of PZT.

Sputter deposition of PZT piezoelectric films on thin glass substrates for adjustable x-ray optics.

Science.gov (United States)

Wilke, Rudeger H T; Johnson-Wilke, Raegan L; Cotroneo, Vincenzo; Davis, William N; Reid, Paul B; Schwartz, Daniel A; Trolier-McKinstry, Susan

2013-05-10

Piezoelectric PbZr(0.52)Ti(0.48)O(3) (PZT) thin films deposited on thin glass substrates have been proposed for adjustable optics in future x-ray telescopes. The light weight of these x-ray optics enables large collecting areas, while the capability to correct mirror figure errors with the PZT thin film will allow much higher imaging resolution than possible with conventional lightweight optics. However, the low strain temperature and flexible nature of the thin glass complicate the use of chemical-solution deposition due to warping of the substrate at typical crystallization temperatures for the PZT. RF magnetron sputtering enabled preparation of PZT films with thicknesses up to 3 μm on Schott D263 glass substrates with much less deformation. X-ray diffraction analysis indicated that the films crystallized with the perovskite phase and showed no indication of secondary phases. Films with 1 cm(2) electrodes exhibited relative permittivity values near 1100 and loss tangents below 0.05. In addition, the remanent polarization was 26 μC/cm(2) with coercive fields of 33 kV/cm. The transverse piezoelectric coefficient was as high as -6.1±0.6 C/m(2). To assess influence functions for the x-ray optics application, the piezoelectrically induced deflection of individual cells was measured and compared with finite-element-analysis calculations. The good agreement between the results suggests that actuation of PZT thin films can control mirror figure errors to a precision of about 5 nm, allowing sub-arcsecond imaging.

The effects of sintering behavior on piezoelectric properties of porous PZT ceramics for hydrophone application

International Nuclear Information System (INIS)

Zeng Tao; Dong Xianlin; Chen Heng; Wang Yonglin

2006-01-01

Porous lead zirconate titanate (PZT) ceramics were fabricated by adding polymethyl methacrylate (PMMA) and the effects of sintering behavior on their microstructure and piezoelectric properties were investigated. The porosity of PZT ceramics decreased with an increase in the sintering temperature at a fixed PMMA addition. The dielectric constant (ε), longitudinal piezoelectric coefficient (d 33 ) and hydrostatic figures of merit (d h g h ) of 34% porous PZT ceramics increased with an increase in sintering temperature from 1050 to 1300 deg. C. When sintered at 1300 deg. C, longitudinal piezoelectric coefficient of 34% porous PZT ceramic was very close to that of 95% dense PZT ceramics, while the hydrostatic figures of merit of 34% porous PZT ceramics is about fifteen times more than that of 95% dense PZT ceramics. Compared with PZT-polymer composites, the dielectric constant of 34% porous PZT sintered at 1300 deg. C is much higher, which can be more efficient to resist the interference in receiving sensitivities caused by loading effect of the cable

Electrical excitation and optical detection of ultrasounds in PZT based piezoelectric transducers

Energy Technology Data Exchange (ETDEWEB)

Babilotte, P; Diallo, O; Hue, L-P Tran Hu; Feuillard, G [University Francois Rabelais de Tours, Laboratory Imaging and Brain, Team Ultrasonic Characterisation and Piezoelectricity, ENIVL, Rue de la Chocolaterie, 41034 BLOIS CEDEX (France); Kosec, M; Kuscer, D, E-mail: philippe.babilotte@univ-tours.fr [Josef Stefan Institute, Jamova cesta 39, 1000 LJUBLJANA (Slovenia)

2011-01-01

The displacement response of piezoelectric PZT thick films fabricated by means of electrophoretic deposition and laid down an alumina substrate is investigated using coherent optical detection. According to thickness properties determined by electrical impedance measurements, the film presents a resonance around 40 MHz. Other resonance peaks are observed that correspond to eigen modes of the film substrate couple structure. Uniformity of the response of the integrated structure is studied across the surface of the sample when excited by either a continuous or impulse electrical voltage. Results on the amplitude of the detected signal versus the frequency and the input excitation voltage are reported. The optical detection used in these experiments is complementary to conventional techniques of characterization of piezoelectric devices such as electrical impedance measurements and allows getting information on the displacement response of the device.

Piezoelectric and mechanical properties of fatigue resistant, self-healing PZT-ionomer composites

NARCIS (Netherlands)

James, N.K.; Lafont, U.; Zwaag, S. van der; Groen, W.A.

2014-01-01

Piezoelectric ceramic-polymer composites with 0-3 connectivity were fabricated using lead zirconium titanate (PZT) powder dispersed in an ionomer (Zn ionomer) and its reference ethylene methacrylic acid copolymer (EMAA) polymer matrix. The PZT-Zn ionomer and PZT-EMAA composites were prepared by melt

Enhanced pyroelectric and piezoelectric properties of PZT with aligned porosity for energy harvesting applications.

Science.gov (United States)

Zhang, Yan; Xie, Mengying; Roscow, James; Bao, Yinxiang; Zhou, Kechao; Zhang, Dou; Bowen, Chris R

2017-04-14

This paper demonstrates the significant benefits of exploiting highly aligned porosity in piezoelectric and pyroelectric materials for improved energy harvesting performance. Porous lead zirconate (PZT) ceramics with aligned pore channels and varying fractions of porosity were manufactured in a water-based suspension using freeze-casting. The aligned porous PZT ceramics were characterized in detail for both piezoelectric and pyroelectric properties and their energy harvesting performance figures of merit were assessed parallel and perpendicular to the freezing direction. As a result of the introduction of porosity into the ceramic microstructure, high piezoelectric and pyroelectric harvesting figures of merits were achieved for porous freeze-cast PZT compared to dense PZT due to the reduced permittivity and volume specific heat capacity. Experimental results were compared to parallel and series analytical models with good agreement and the PZT with porosity aligned parallel to the freezing direction exhibited the highest piezoelectric and pyroelectric harvesting response; this was a result of the enhanced interconnectivity of the ferroelectric material along the poling direction and reduced fraction of unpoled material that leads to a higher polarization. A complete thermal energy harvesting system, composed of a parallel-aligned PZT harvester element and an AC/DC converter, was successfully demonstrated by charging a storage capacitor. The maximum energy density generated by the 60 vol% porous parallel-connected PZT when subjected to thermal oscillations was 1653 μJ cm -3 , which was 374% higher than that of the dense PZT with an energy density of 446 μJ cm -3 . The results are beneficial for the design and manufacture of high performance porous pyroelectric and piezoelectric materials in devices for energy harvesting and sensor applications.

Fabrication and Characterization of PZT Thick Films for Sensing and Actuation

Directory of Open Access Journals (Sweden)

Kuo-Ching Kuo

2007-04-01

Full Text Available Lead Zirconate Titanate oxide (PZT thick films with thicknesses of up to 10 μmwere developed using a modified sol-gel technique. Usually, the film thickness is less than1 μm by conventional sol-gel processing, while the electrical charge accumulation whichreveals the direct effect of piezoelectricity is proportional to the film thickness and thereforerestricted. Two approaches were adopted to conventional sol-gel processing – precursorconcentration modulation and rapid thermal annealing. A 10 μm thick film was successfullyfabricated by coating 16 times via this technique. The thickness of each coating layer wasabout 0.6 μm and the morphology of the film was dense with a crack-free area as large as 16mm2. In addition, the structure, surface morphology and physical properties werecharacterized by X-ray diffraction (XRD, scanning electron microscopy (SEM and atomicforce microscopy (AFM and electrical performance. The dielectric constant and hysteresisloops were measured as electric characteristics. This study investigates the actuation andsensing performance of the vibrating structures with the piezoelectric thick film. Theactuation tests demonstrated that a 4 mm x 4 mm x 6.5 μm PZT film drove a 40 mm x 7 mmx 0.5 mm silicon beam as an actuator. Additionally, it generated an electrical signal of 60mVpp as a sensor, while vibration was input by a shaker. The frequencies of the first twomodes of the beam were compared with the theoretical values obtained by Euler-Bernoullibeam theory. The linearity of the actuation and sensing tests were also examined.

Influence of processing parameters on PZT thick films

International Nuclear Information System (INIS)

Huang, Oliver; Bandyopadhyay, Amit; Bose, Susmita

2005-01-01

We have studied influence of processing parameters on the microstructure and ferroelectric properties of lead zirconate titanate (PZT)-based thick films in the range of 5-25 μm. PZT and 2% La-doped PZT thick films were processed using a modified sol-gel process. In this process, PZT- and La-doped PZT powders were first prepared via sol-gel. These powders were calcined and then used with respective sols to form a slurry. Slurry composition was optimized to spin-coat thick films on platinized Si substrate (Si/SiO 2 /Ti/Pt). Spinning rate, acceleration and slurry deposition techniques were optimized to form thick films with uniform thickness and without any cracking. Increasing solids loading was found to enhance the surface smoothness of the film and decrease porosity. Films were tested for their electrical properties and ferroelectric fatigue response. The maximum polarization obtained was 40 μC/cm 2 at 250 kV/cm for PZT thick film and 30 μC/cm 2 at 450 kV/cm for La-doped PZT thick film. After 10 9 cycles of fatiguing at 35 kHz, La-doped PZT showed better resistance for ferroelectric fatigue compared with un-doped PZT films

Pre-stressed piezoelectric bimorph micro-actuators based on machined 40 µm PZT thick films: batch scale fabrication and integration with MEMS

International Nuclear Information System (INIS)

Wilson, S A; Jourdain, R P; Owens, S

2010-01-01

The projected force–displacement capability of piezoelectric ceramic films in the 20–50 µm thickness range suggests that they are well suited to many micro-fluidic and micro-pneumatic applications. Furthermore when they are configured as bending actuators and operated at ∼ 1 V µm −1 they do not necessarily conform to the high-voltage, very low-displacement piezoelectric stereotype. Even so they are rarely found today in commercial micro-electromechanical devices, such as micro-pumps and micro-valves, and the main barriers to making them much more widely available would appear to be processing incompatibilities rather than commercial desirability. In particular, the issues associated with integration of these devices into MEMS at the production level are highly significant and they have perhaps received less attention in the mainstream than they deserve. This paper describes a fabrication route based on ultra-precision ceramic machining and full-wafer bonding for cost-effective batch scale production of thick film PZT bimorph micro-actuators and their integration with MEMS. The resulting actuators are pre-stressed (ceramic in compression) which gives them added performance, they are true bimorphs with bi-directional capability and they exhibit full bulk piezoelectric ceramic properties. The devices are designed to integrate with ancillary systems components using transfer-bonding techniques. The work forms part of the European Framework 6 Project 'Q2M—Quality to Micro'

Influence of PZT Coating Thickness and Electrical Pole Alignment on Microresonator Properties.

Science.gov (United States)

Janusas, Giedrius; Ponelyte, Sigita; Brunius, Alfredas; Guobiene, Asta; Vilkauskas, Andrius; Palevicius, Arvydas

2016-11-10

With increasing technical requirements in the design of microresonators, the development of new techniques for lightweight, simple, and inexpensive components becomes relevant. Lead zirconate titanate (PZT) is a powerful tool in the formation of these components, allowing a self-actuation or self-sensing capability. Different fabrication methods lead to the variation of the properties of the device itself. This research paper covers the fabrication of a novel PZT film and the investigations of its chemical, surface, and dynamic properties when film thickness is varied. A screen-printing technique was used for the formation of smooth films of 60 µm, 68 µm, and 25 µm thickness. A custom-made poling technique was applied to enhance the piezoelectric properties of the designed films. However, poling did not change any compositional or surface characteristics of the films; changes were only seen in the electrical ones. The results showed that a thinner poled PZT film having a chemical composition with the highest amount of copper and zirconium led to better electrical characteristics (generated voltage of 3.5 mV).

Structural and electrical characterization of PZT on gold for micromachined piezoelectric membranes

International Nuclear Information System (INIS)

Robinson, M.C.; Morris, D.J.; Hayenga, P.D.; Cho, J.H.; Richards, C.D.; Richards, R.F.; Bahr, D.F.

2006-01-01

Piezoelectric membranes have been fabricated that incorporate a gold bottom electrode with an adhesion layer of titanium-tungsten (10:90 wt. %). For solution-deposited acetic acid based lead zirconate titanate (HoAc-PZT) with a Zr:Ti ratio of 40:60, the film's average piezoelectric coefficient, e 31 , is -5.31 C/m 2 , with a dielectric constant of 814 at 200 Hz, which is similar to values for platinum bottom electrodes. The PZT structure remains columnar on both types of bottom electrodes. Initial fabrication attempts resulted in cracking that initiated in the PZT layer of the structure. X-ray photoelectron spectroscopy was utilized to establish how processing affects diffusion throughout the composite membrane structure. Crack-free membranes were fabricated and tested. This paper discusses the performance properties and piezoelectric fatigue results for these membranes. (orig.)

A low-frequency MEMS piezoelectric energy harvester with a rectangular hole based on bulk PZT film

Science.gov (United States)

Tian, Yingwei; Li, Guimiao; Yi, Zhiran; Liu, Jingquan; Yang, Bin

2018-06-01

This paper presents a high performance piezoelectric energy harvester (PEH) with a rectangular hole to work at low-frequency. This PEH used thinned bulk PZT film on flexible phosphor bronze, and its structure included piezoelectric layer, supporting layer and proof mass to reduce the resonant frequency of the device. Here, thinned bulk PZT thick film was used as piezoelectric layer due to its high piezoelectric coefficient. A Phosphor bronze was deployed as supporting layer because it had better flexibility compared to silicon and could work under high acceleration ambient with good durability. The maximum open-circuit voltage of the PEH was 15.7 V at low resonant frequency of 34.3 Hz when the input vibration acceleration was 1.5 g (g = 9.81 m/s2). Moreover, the maximum output power, the output power density and the actually current at the same acceleration were 216.66 μW, 1713.58 μW/cm3 and 170 μA, respectively, when the optimal matched resistance of 60 kΩ was connected. The fabricated PEH scavenged the vibration energy of the vacuum compression pump and generated the maximum output voltage of 1.19 V.

Study on optimizing ultrasonic irradiation period for thick polycrystalline PZT film by hydrothermal method.

Science.gov (United States)

Ohta, Kanako; Isobe, Gaku; Bornmann, Peter; Hemsel, Tobias; Morita, Takeshi

2013-04-01

The hydrothermal method utilizes a solution-based chemical reaction to synthesize piezoelectric thin films and powders. This method has a number of advantages, such as low-temperature synthesis, and high purity and high quality of the product. In order to promote hydrothermal reactions, we developed an ultrasonic assisted hydrothermal method and confirmed that it produces dense and thick lead-zirconate-titanate (PZT) films. In the hydrothermal method, a crystal growth process follows the nucleation process. In this study, we verified that ultrasonic irradiation is effective for the nucleation process, and there is an optimum irradiation period to obtain thicker PZT films. With this optimization, a 9.2-μm-thick PZT polycrystalline film was obtained in a single deposition process. For this film, ultrasonic irradiation was carried out from the beginning of the reaction for 18 h, followed by a 6 h deposition without ultrasonic irradiation. These results indicate that the ultrasonic irradiation mainly promotes the nucleation process. Copyright © 2012 Elsevier B.V. All rights reserved.

Enhanced off-resonance magnetoelectric response in laser annealed PZT thick film grown on magnetostrictive amorphous metal substrate

Energy Technology Data Exchange (ETDEWEB)

Palneedi, Haribabu [Materials Interface Laboratory, Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 305-701 (Korea, Republic of); Functional Ceramics Group, Korea Institute of Materials Science (KIMS), Changwon 641-831 (Korea, Republic of); Maurya, Deepam; Priya, Shashank [Bio-inspired Materials and Devices Laboratory (BMDL), Center for Energy Harvesting Materials and Systems (CEHMS), Virginia Tech, Blacksburg, Virginia 24061 (United States); Kim, Gi-Yeop; Choi, Si-Young, E-mail: youngchoi@kims.re.kr [Materials Modeling and Characterization Department, Korea Institute of Materials Science (KIMS), Changwon 641-831 (Korea, Republic of); Kang, Suk-Joong L. [Materials Interface Laboratory, Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 305-701 (Korea, Republic of); Kim, Kwang-Ho [School of Materials Science and Engineering, Pusan National University, Busan 609-735 (Korea, Republic of); Ryu, Jungho, E-mail: jhryu@kims.re.kr [Functional Ceramics Group, Korea Institute of Materials Science (KIMS), Changwon 641-831 (Korea, Republic of)

2015-07-06

A highly dense, 4 μm-thick Pb(Zr,Ti)O{sub 3} (PZT) film is deposited on amorphous magnetostrictive Metglas foil (FeBSi) by granule spray in vacuum process at room temperature, followed by its localized annealing with a continuous-wave 560 nm ytterbium fiber laser radiation. This longer-wavelength laser radiation is able to anneal the whole of thick PZT film layer without any deteriorative effects, such as chemical reaction and/or atomic diffusion, at the interface and crystallization of amorphous Metglas substrate. Greatly enhanced dielectric and ferroelectric properties of the annealed PZT are attributed to its better crystallinity and grain growth induced by laser irradiation. As a result, a colossal off-resonance magnetoelectric (ME) voltage coefficient that is two orders of magnitude larger than previously reported output from PZT/Metglas film-composites is achieved. The present work addresses the problems involved in the fabrication of PZT/Metglas film-composites and opens up emerging possibilities in employing piezoelectric materials with low thermal budget substrates (suitable for integrated electronics) and designing laminate composites for ME based devices.

Highly-efficient, flexible piezoelectric PZT thin film nanogenerator on plastic substrates.

Science.gov (United States)

Park, Kwi-Il; Son, Jung Hwan; Hwang, Geon-Tae; Jeong, Chang Kyu; Ryu, Jungho; Koo, Min; Choi, Insung; Lee, Seung Hyun; Byun, Myunghwan; Wang, Zhong Lin; Lee, Keon Jae

2014-04-23

A highly-efficient, flexible piezoelectric PZT thin film nanogenerator is demonstrated using a laser lift-off (LLO) process. The PZT thin film nanogenerator harvests the highest output performance of ∼200 V and ∼150 μA·cm(-2) from regular bending motions. Furthermore, power sources generated from a PZT thin film nanogenerator, driven by slight human finger bending motions, successfully operate over 100 LEDs. © 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

Fabrication and characterization of MEMS-based PZT/PZT bimorph thick film vibration energy harvesters

DEFF Research Database (Denmark)

Xu, Ruichao; Lei, Anders; Dahl-Petersen, Christian

2012-01-01

We describe the fabrication and characterization of a significantly improved version of a microelectromechanical system-based PZT/PZT thick film bimorph vibration energy harvester with an integrated silicon proof mass; the harvester is fabricated in a fully monolithic process. The main advantage...... yield of 98%. The robust fabrication process allowed a high pressure treatment of the screen printed PZT thick films prior to sintering. The high pressure treatment improved the PZT thick film performance and increased the harvester power output to 37.1 μW at 1 g root mean square acceleration. We also...... characterize the harvester performance when only one of the PZT layers is used while the other is left open or short circuit....

Optimization of electrode geometry and piezoelectric layer thickness of a deformable mirror

Directory of Open Access Journals (Sweden)

Nováková Kateřina

2013-05-01

Full Text Available Deformable mirrors are the most commonly used wavefront correctors in adaptive optics systems. Nowadays, many applications of adaptive optics to astronomical telescopes, high power laser systems, and similar fast response optical devices require large diameter deformable mirrors with a fast response time and high actuator stroke. In order to satisfy such requirements, deformable mirrors based on piezoelectric layer composite structures have become a subject of intense scientific research during last two decades. In this paper, we present an optimization of several geometric parameters of a deformable mirror that consists of a nickel reflective layer deposited on top of a thin lead zirconate titanate (PZT piezoelectric disk. Honeycomb structure of gold electrodes is deposited on the bottom of the PZT layer. The analysis of the optimal thickness ratio between the PZT and nickel layers is performed to get the maximum actuator stroke using the finite element method. The effect of inter-electrode distance on the actuator stroke and influence function is investigated. Applicability and manufacturing issues are discussed.

Study of dielectric and piezoelectric properties of CNT reinforced PZT-PVA 0-3 composite

Science.gov (United States)

Vyas, Prince; Prajapat, Rampratap; Manmeeta, Saxena, Dhiraj

2016-05-01

Ferroelectric ceramic/polymer composites have the compliance of polymers which overcome the problems of brittleness in ceramics. By imbedding piezoelectric ceramic powder into a polymer matrix, 0-3 composites with good mechanical properties and high dielectric breakdown strength can be developed. The obtained composites of 0-3 connectivity exhibit the piezoelectric properties of ceramics and flexibility, strength and lightness of polymer. These composites can be used in vibration sensing and transducer applications specially as piezoelectric sensors. A potential way to improve piezoelectric& dielectric properties of theses composites is by inclusion of another conductive phase in these composites as reported in the literature. In present work, we prepared PZT-PVA 0-3 composites with 60% ceramic volume fraction reinforced with CNTs with volume ranging from 0 to 1.5 vol%. These CNT reinforced composites were obtained using hot press method with thickness of 200 µm having 0-3 conductivity. These composites were poled applying DC voltage. Dielectric properties of these samples were obtained in a wide frequency range (100 Hz to 1 Mhz) at room temperature. The piezoelectric properties of these composites were analyzed by measuring piezoelectric charge constants (d33). The dielectric and piezoelectric properties of these composites were studied as a function of CNT volume content. In these reinforced composites, CNTs act as a conductive filler dispersed in the matrix which in turn facilitates poling and results in an increase of the piezoelectric properties of the composite due to formation of percolation path through the composites. With a CNT content of 0.3 vol.% in PZT/PVA/CNTs, an increase of 61.3 % was observed in piezoelectric strain factors (d33). In these CNT reinforced composites, a substantial increase (approx. 67%) was also observed in dielectric constant and approximately 89% increase was observed in dielectric loss factor. Results so obtained are in the good

Theoretical and Experimental Study on Secondary Piezoelectric Effect Based on PZT-5

International Nuclear Information System (INIS)

Zhang, Z H; Sun, B Y; Shi, L P

2006-01-01

The purpose of this paper is to confirm the existence of secondary and multiple piezoelectric effect theoretically and experimentally. Based on Heckmann model showing the relationship among mechanical, electric and heat energy and the physical model on mechanical, electric, heat, and magnetic energy, theoretical analysis of multiple piezoelectric effect is made through four kinds of piezoelectric equations. Experimental research of secondary direct piezoelectric effect is conducted through adopting PZT-5 piles. The result of the experiment indicates that charge generated by secondary direct piezoelectric effect as well as displacement caused by first converse piezoelectric effect keeps fine linearity with the applied voltage

PZT/PLZT - elastomer composites with improved piezoelectric voltage coefficient

Science.gov (United States)

Harikrishnan, K.; Bavbande, D. V.; Mohan, Dhirendra; Manoharan, B.; Prasad, M. R. S.; Kalyanakrishnan, G.

2018-02-01

Lead Zirconate Titanate (PZT) and Lanthanum-modified Lead Zirconate Titanate (PLZT) ceramic sensor materials are widely used because of their excellent piezoelectric coefficients. These materials are brittle, high density and have low achievable piezoelectric voltage coefficients. The density of the sintered ceramics shall be reduced by burnable polymeric sponge method. The achievable porosity level in this case is nearly 60 - 90%. However, the porous ceramic structure with 3-3 connectivity produced by this method is very fragile in nature. The strength of the porous structure is improved with Sylgard®-184 (silicone elastomer) by vacuum impregnation method maintaining the dynamic vacuum level in the range of -650 mm Hg. The elastomer Sylgard®-184 is having low density, low dielectric constant and high compliance (as a resultant stiffness of the composites is increased). To obtain a net dipole moment, the impregnated ceramic composites were subjected to poling treatment with varying conditions of D.C. field and temperature. The properties of the poled PZT/PLZT - elastomer composites were characterized with LCR meter for measuring the dielectric constant values (k), d33 meter used for measuring piezo-electric charge coefficient values (d33) and piezo-electric voltage coefficient (g33) values which were derived from d33 values. The voltage coefficient (g33) values of these composites are increased by 10 fold as compared to the conventional solid ceramics demonstrates that it is possible to fabricate a conformable detector.

Design, Modeling and Optimization of a Piezoelectric Pressure Sensor based on a Thin-Film PZT Membrane Containing Nanocrystalline Powders

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Vahid MOHAMMADI

2009-11-01

Full Text Available In this paper fabrication of a 0-3 ceramic/ceramic composite lead zirconate titanate, Pb(Zr0.52Ti0.48O3 thin film has been presented and then a pressure sensor based on multilayer thin-film PZT diaphragm contain of Lead Zirconate Titanate nanocrystalline powders was designed, modeled and optimized. Dynamics characteristics of this multilayer diaphragm have been investigated by ANSYS® FE software. By this simulation the effective parameters of the multilayer PZT diaphragm for improving the performance of a pressure sensor in different ranges of pressure are optimized. The optimized thickness ratio of PZT layer to SiO2 was given in the paper to obtain the maximum deflection of the multilayer thin-film PZT diaphragm. A 0-3 ceramic/ceramic composite lead zirconate titanate, Pb(Zr0.52Ti0.48O3 film has been developed to fabricate the pressure sensor by a hybrid sol gel process. PZT nanopowders fabricated via conventional sol gel method and uniformly dispersed in PZT precursor solution by an attrition mill. XRD analysis shows that perovskite structure would be formed due to the presence of a significant amount of ceramic nanopowders. This texture has a good effect on piezoelectric properties of perovskite structure. The film forms a strongly bonded network and less shrinkage occurs, so the films do not crack during process. Also the aspect ratio through this process would be increased. SEM micrographs indicated that PZT films were uniform, crack free and have a composite microstructure and a piezoelectric coefficient d31 of -40 pC.N-1 and d33 ranged from 50pm.N-1 to 60pm.N-1.

Towards a digital sound reconstruction MEMS device: Characterization of a single PZT based piezoelectric actuator

KAUST Repository

Carreno, Armando Arpys Arevalo

2015-04-01

In this paper we report the fabrication and characterization of a single piezoelectric actuator for digital sound reconstruction. This work is the first step towards the implementation of a true digital micro-loudspeaker by means of an array of acoustic actuators. These actuators consist of a flexible membrane fabricated using polyimide, which is actuated using a Lead-Zirconate-Titanate (PZT) piezoelectric ceramic layer working in the d31 actuation mode. The dimensions of the membrane are of 1mm diameter and 4μm in thickness, which is capable of being symmetrically actuated in both upward and downward directions, due to the back etch step releasing the membrane. Our electrical characterization shows an improvement in the polarization of the piezoelectric material after its final etch patterning step, and our mechanical characterization shows the natural modes of resonance of the stacked membrane. © 2015 IEEE.

A modified barbell-shaped PNN-PZT-PIN piezoelectric ceramic energy harvester

Science.gov (United States)

Gao, Xiangyu; Wu, Jingen; Yu, Yang; Dong, Shuxiang

2017-11-01

The quaternary system of relaxor-ferroelectric based Pb(Ni1/3Nb2/3)O3-Pb(ZrxTi1-x)O3-Pb(In0.5Nb0.5)O3 (PNN-PZT-PIN) piezoelectric ceramic at the morphotropic phase boundary was investigated via the solid reaction method. The optimized ceramic with excellent electric properties of ɛr = 8084, d33 = 977 pC/N, kp = 0.61, and Ec = 3.0 kV/cm was fabricated into d33-mode discs with separated surface electrodes, which were arranged in a series connection and, then as a piezo-stack, assembled into a barbell-shaped energy harvester that could bear a strong mechanical vibration. It is found that under a vibration mass-induced bending moment, the energy harvester produces an open circuit voltage of 26.4 Vp-p at the acceleration of 2.5 g at a load of 1.56 MΩ, which is two times higher in comparison to one without surface electrode separation. Its power output is 30 μW at the acceleration of 1 g and 104 μW at 2.5 g, which are even six times higher than that of a previously reported barbell-shaped energy harvester at room-temperature with the same acceleration. The enhanced power output can be attributed to (i) the excellent piezoelectric response of PNN-PZT-PIN ceramic and (ii) harvesting positive and negative charges from the separated surface electrodes other than a full surface electrode on piezoelectric discs under bending moment. Furthermore, the practical test was performed within a car engine, which shows that the PNN-PZT-PIN piezoelectric ceramic is a promising candidate for vibration energy harvesting.

PZT piezoelectric films on glass for Gen-X imaging

Science.gov (United States)

Wilke, Rudeger H. T.; Trolier-McKinstry, Susan; Reid, Paul B.; Schwartz, Daniel A.

2010-09-01

The proposed adaptive optics system for the Gen-X telescope uses piezoelectric lead zirconate titanate (PZT) films deposited on flexible glass substrates. The low softening transition of the glass substrates imposes several processing challenges that require the development of new approaches to deposit high quality PZT thin films. Synthesis and optimization of chemical solution deposited 1 μm thick films of PbZr0.52Ti0.48O3 on small area (1 in2) and large area (16 in2) Pt/Ti/glass substrates has been performed. In order to avoid warping of the glass at temperatures typically used to crystallize PZT films ({700°C), a lower temperature, two-step crystallization process was employed. An {80 nm thick seed layer of PbZr0.30Ti0.70O3 was deposited to promote the growth of the perovskite phase. After the deposition of the seed layer, the films were annealed in a rapid thermal annealing (RTA) furnace at 550°C for 3 minutes to nucleate the perovskite phase. This was followed by isothermal annealing at 550°C for 1 hour to complete crystallization. For the subsequent PbZr0.52Ti0.48O3 layers, the same RTA protocol was performed, with the isothermal crystallization implemented following the deposition of three PbZr0.52Ti0.48O3 spin-coated layers. Over the frequency range of 1 kHz to 100 kHz, films exhibit relative permittivity values near 800 with loss tangents below 0.07. Hysteresis loops show low levels of imprint with coercive fields of 40-50 kV/cm in the forward direction and 50-70 kV/cm in the reverse direction. The remanent polarization varied from 25-35 μC/cm2 and e31,f values were approximately -5.0 C/m2. In scaling up the growth procedure to large area films, where warping becomes more pronounced due to the increased size of the substrate, the pyrolysis and crystallization conditions were performed in a box furnace to improve the temperature uniformity. By depositing films on both sides of the glass substrate, the tensile stresses are balanced, providing a

Measurement of effective piezoelectric coefficients of PZT thin films for energy harvesting application with interdigitated electrodes.

Science.gov (United States)

Chidambaram, Nachiappan; Mazzalai, Andrea; Muralt, Paul

2012-08-01

Interdigitated electrode (IDE) systems with lead zirconate titanate (PZT) thin films play an increasingly important role for two reasons: first, such a configuration generates higher voltages than parallel plate capacitor-type electrode (PPE) structures, and second, the application of an electric field leads to a compressive stress component in addition to the overall stress state, unlike a PPE structure, which results in tensile stress component. Because ceramics tend to crack at relatively moderate tensile stresses, this means that IDEs have a lower risk of cracking than PPEs. For these reasons, IDE systems are ideal for energy harvesting of vibration energy, and for actuators. Systematic investigations of PZT films with IDE systems have not yet been undertaken. In this work, we present results on the evaluation of the in-plane piezoelectric coefficients with IDE systems. Additionally, we also propose a simple and measurable figure of merit (FOM) to analyze and evaluate the relevant piezoelectric parameter for harvesting efficiency without the need to fabricate the energy harvesting device. Idealized effective coefficients e(IDE) and h(IDE) are derived, showing its composite nature with about one-third contribution of the transverse effect, and about two-thirds contribution of the longitudinal effect in the case of a PZT film deposited on a (100)-oriented silicon wafer with the in-plane electric field along one of the Si directions. Randomly oriented 1-μm-thick PZT 53/47 film deposited by a sol-gel technique, was evaluated and yielded an effective coefficient e(IDE) of 15 C·m(-2). Our FOM is the product between effective e and h coefficient representing twice the electrical energy density stored in the piezoelectric film per unit strain deformation (both for IDE and PPE systems). Assuming homogeneous fields between the fingers, and neglecting the contribution from below the electrode fingers, the FOM for IDE structures with larger electrode gap is derived to be

Recent Progress on PZT Based Piezoelectric Energy Harvesting Technologies

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Min-Gyu Kang

2016-02-01

Full Text Available Energy harvesting is the most effective way to respond to the energy shortage and to produce sustainable power sources from the surrounding environment. The energy harvesting technology enables scavenging electrical energy from wasted energy sources, which always exist everywhere, such as in heat, fluids, vibrations, etc. In particular, piezoelectric energy harvesting, which uses a direct energy conversion from vibrations and mechanical deformation to the electrical energy, is a promising technique to supply power sources in unattended electronic devices, wireless sensor nodes, micro-electronic devices, etc., since it has higher energy conversion efficiency and a simple structure. Up to now, various technologies, such as advanced materials, micro- and macro-mechanics, and electric circuit design, have been investigated and emerged to improve performance and conversion efficiency of the piezoelectric energy harvesters. In this paper, we focus on recent progress of piezoelectric energy harvesting technologies based on PbZrxTi1-xO3 (PZT materials, which have the most outstanding piezoelectric properties. The advanced piezoelectric energy harvesting technologies included materials, fabrications, unique designs, and properties are introduced to understand current technical levels and suggest the future directions of piezoelectric energy harvesting.

Characterization of Kerfless Linear Arrays Based on PZT Thick Film.

Science.gov (United States)

Zawada, Tomasz; Bierregaard, Louise Moller; Ringgaard, Erling; Xu, Ruichao; Guizzetti, Michele; Levassort, Franck; Certon, Dominique

2017-09-01

Multielement transducers enabling novel cost-effective fabrication of imaging arrays for medical applications have been presented earlier. Due to the favorable low lateral coupling of the screen-printed PZT, the elements can be defined by the top electrode pattern only, leading to a kerfless design with low crosstalk between the elements. The thick-film-based linear arrays have proved to be compatible with a commercial ultrasonic scanner and to support linear array beamforming as well as phased array beamforming. The main objective of the presented work is to investigate the performance of the devices at the transducer level by extensive measurements of the test structures. The arrays have been characterized by several different measurement techniques. First, electrical impedance measurements on several elements in air and liquid have been conducted in order to support material parameter identification using the Krimholtz-Leedom-Matthaei model. It has been found that electromechanical coupling is at the level of 35%. The arrays have also been characterized by a pulse-echo system. The measured sensitivity is around -60 dB, and the fractional bandwidth is close to 60%, while the center frequency is about 12 MHz over the whole array. Finally, laser interferometry measurements have been conducted indicating very good displacement level as well as pressure. The in-depth characterization of the array structure has given insight into the performance parameters for the array based on PZT thick film, and the obtained information will be used to optimize the key parameters for the next generation of cost-effective arrays based on piezoelectric thick film.

Determination of the piezoelectric properties of fine scale PZT fibres

Energy Technology Data Exchange (ETDEWEB)

Nelson, L.J.; Bowen, C.R. [Bath Univ. (United Kingdom). Dept. of Engineering and Applied Science

2002-07-01

Finite element (FE) modelling is used to determine the effect of fibre volume fraction, aspect ratio and polymer matrix stiffness on the d{sub 33} coefficients of 1-3 connectivity piezoelectric fibre composites. The aim is to use these observations as a means of determining the d{sub 33} of fine scale lead zirconate titanate (PZT) fibres. Results from a 1-D analytical model fit well with FE predictions for low aspect ratios. Two commercially available PZT-5A fibres, produced via the viscous suspension spinning process (VSSP) and an extrusion process, were fabricated into 1-3 composites with varying fibre volume fractions. The composite d{sub 33} measurements are compared to the model predictions and used to determine the d{sub 33} coefficients of the fibers. The d{sub 33} of the VSSP fibres and extruded fibres is measured as 365 pCN{sup -1} and 235 pCN{sup -1} respectively using this method. The large difference in the piezoelectric coefficients is possibly linked to the grain size and porosity, which is examined using scanning electron microscopy. (orig.)

Realization of face-shear piezoelectric coefficient d36 in PZT ceramics via ferroelastic domain engineering

Science.gov (United States)

Miao, Hongchen; Li, Faxin

2015-09-01

The piezoelectric face-shear ( d36 ) mode may be the most useful shear mode in piezoelectrics, while currently this mode can only exist in single crystals of specific point groups and cut directions. Theoretically, the d36 coefficient vanishes in piezoelectric ceramics because of its transversally isotropic symmetry. In this work, we modified the symmetry of poled PZT ceramics from transversally isotropic to orthogonal through ferroelastic domain switching by applying a high lateral stress along the "2" direction and holding the stress for several hours. After removing the compression, the piezoelectric coefficient d31 is found much larger than d32 . Then, by cutting the compressed sample along the Z x t ±45 ° direction, we realized d36 coefficients up to 206 pC/N , which is measured by using a modified d33 meter. The obtained large d36 coefficients in PZT ceramics could be very promising for face-shear mode resonators and shear horizontal wave generation in nondestructive testing.

Wafer-scale growth of highly textured piezoelectric thin films by pulsed laser deposition for micro-scale sensors and actuators

Science.gov (United States)

Nguyen, M. D.; Tiggelaar, R.; Aukes, T.; Rijnders, G.; Roelof, G.

2017-11-01

Piezoelectric lead-zirconate-titanate (PZT) thin films were deposited on 4-inch (111)Pt/Ti/SiO2/Si(001) wafers using large-area pulsed laser deposition (PLD). This study was focused on the homogeneity in film thickness, microstructure, ferroelectric and piezoelectric properties of PZT thin films. The results indicated that the highly textured (001)-oriented PZT thin films with wafer-scale thickness homogeneity (990 nm ± 0.8%) were obtained. The films were fabricated into piezoelectric cantilevers through a MEMS microfabrication process. The measured longitudinal piezoelectric coefficient (d 33f = 210 pm/V ± 1.6%) and piezoelectric transverse coefficient (e 31f = -18.8 C/m2 ± 2.8%) were high and homogeneity across wafers. The high piezoelectric properties on Si wafers will extend industrial application of PZT thin films and further development of piezoMEMS.

Piezoelectric characterization of Pb(Zr,Ti)O3 thin films deposited on metal foil substrates by dip coating

Science.gov (United States)

Hida, Hirotaka; Hamamura, Tomohiro; Nishi, Takahito; Tan, Goon; Umegaki, Toshihito; Kanno, Isaku

2017-10-01

We fabricated the piezoelectric bimorphs composed of Pb(Zr,Ti)O3 (PZT) thin films on metal foil substrates. To efficiently inexpensively manufacture piezoelectric bimorphs with high flexibility, 1.2-µm-thick PZT thin films were directly deposited on both surfaces of 10- and 20-µm-thick bare stainless-steel (SS) foil substrates by dip coating with a sol-gel solution. We confirmed that the PZT thin films deposited on the SS foil substrates at 500 °C or above have polycrystalline perovskite structures and the measured relative dielectric constant and dielectric loss were 323-420 and 0.12-0.17, respectively. The PZT bimorphs were demonstrated by comparing the displacements of the cantilever specimens driven by single- and double-side PZT thin films on the SS foil substrates under the same applied voltage. We characterized the piezoelectric properties of the PZT bimorphs and the calculated their piezoelectric coefficient |e 31,f| to be 0.3-0.7 C/m2.

MEMS-based thick film PZT vibrational energy harvester

DEFF Research Database (Denmark)

Lei, Anders; Xu, Ruichao; Thyssen, Anders

2011-01-01

We present a MEMS-based unimorph silicon/PZT thick film vibrational energy harvester with an integrated proof mass. We have developed a process that allows fabrication of high performance silicon based energy harvesters with a yield higher than 90%. The process comprises a KOH etch using a mechan......We present a MEMS-based unimorph silicon/PZT thick film vibrational energy harvester with an integrated proof mass. We have developed a process that allows fabrication of high performance silicon based energy harvesters with a yield higher than 90%. The process comprises a KOH etch using...... a mechanical front side protection of an SOI wafer with screen printed PZT thick film. The fabricated harvester device produces 14.0 μW with an optimal resistive load of 100 kΩ from 1g (g=9.81 m s-2) input acceleration at its resonant frequency of 235 Hz....

Ferroelectric and piezoelectric properties of epitaxial PZT films and devices on silicon

NARCIS (Netherlands)

Nguyen, Duc Minh

2010-01-01

In this thesis, the integration of lead zirconate titanate Pb(Zr,Ti)O3 (PZT) thin films into piezoelectric microelectromechanical systems (MEMS) based on silicon is studied. In these structures, all epitaxial oxide layers (thin film/electrode/buffer-layer(s)) were deposited by pulsed laser

Improving yield of PZT piezoelectric devices on glass substrates

Science.gov (United States)

Johnson-Wilke, Raegan L.; Wilke, Rudeger H. T.; Cotroneo, Vincenzo; Davis, William N.; Reid, Paul B.; Schwartz, Daniel A.; Trolier-McKinstry, Susan

2012-10-01

The proposed SMART-X telescope includes adaptive optics systems that use piezoelectric lead zirconate titanate (PZT) films deposited on flexible glass substrates. Several processing constraints are imposed by current designs: the crystallization temperature must be kept below 550 °C, the total stress in the film must be minimized, and the yield on 1 cm2 actuator elements should be work, RF magnetron sputtering was used to deposit films since chemical solution deposition (CSD) led to warping of large area flexible glass substrates. A PZT 52/48 film that wasdeposited at 4 mTorr and annealed at 550 °C for 24 hours showed no detectable levels of either PbO or pyrochlore second phases. Large area electrodes (1cm x 1 cm) were deposited on 4" glass substrates. Initially, the yield of the devices was low, however, two methods were employed to increase the yield to near 100 %. The first method included a more rigorous cleaning to improve the continuity of the Pt bottom electrode. The second method was to apply 3 V DC across the capacitor structure to burn out regions of defective PZT. The result of this latter method essentially removed conducting filaments in the PZT but left the bulk of the material undamaged. By combining these two methods, the yield on the large area electrodes improved from < 10% to nearly 100%.

Flexible Piezoelectric Generators by Using the Bending Motion Method of Direct-Grown-PZT Nanoparticles on Carbon Nanotubes.

Science.gov (United States)

Han, Jin Kyu; Jeon, Do Hyun; Cho, Sam Yeon; Kang, Sin Wook; Lim, Jongsun; Bu, Sang Don

2017-10-07

Recently, composite-type nanogenerators (NGs) formed from piezoelectric nanostructures and multi-walled carbon nanotubes (CNTs), have become one of the excellent candidates for future energy harvesting because of their ability to apply the excellent electrical and mechanical properties of CNTs. However, the synthesis of NG devices with a high proportion of piezoelectric materials and a low polymer content, such as of polydimethylsiloxane (PDMS), continues to be problematic. In this work, high-piezoelectric-material-content flexible films produced from Pb(Zr,Ti)O₃ (PZT)-atomically-interconnected CNTs and polytetrafluoroethylene (PTFE) are presented. Various physical and chemical characterization techniques are employed to examine the morphology and structure of the materials. The direct growth of the piezoelectric material on the CNTs, by stirring the PZT and CNT mixed solution, results in various positive effects, such as a high-quality dispersion in the polymer matrix and addition of flexoelectricity to piezoelectricity, resulting in the enhancement of the output voltage by an external mechanical force. The NGs repeatedly generate an output voltage of 0.15 V. These results present a significant step toward the application of NGs using piezoelectric nanocomposite materials.

Flexible Piezoelectric Generators by Using the Bending Motion Method of Direct-Grown-PZT Nanoparticles on Carbon Nanotubes

Directory of Open Access Journals (Sweden)

Jin Kyu Han

2017-10-01

Full Text Available Recently, composite-type nanogenerators (NGs formed from piezoelectric nanostructures and multi-walled carbon nanotubes (CNTs, have become one of the excellent candidates for future energy harvesting because of their ability to apply the excellent electrical and mechanical properties of CNTs. However, the synthesis of NG devices with a high proportion of piezoelectric materials and a low polymer content, such as of polydimethylsiloxane (PDMS, continues to be problematic. In this work, high-piezoelectric-material-content flexible films produced from Pb(Zr,TiO3 (PZT-atomically-interconnected CNTs and polytetrafluoroethylene (PTFE are presented. Various physical and chemical characterization techniques are employed to examine the morphology and structure of the materials. The direct growth of the piezoelectric material on the CNTs, by stirring the PZT and CNT mixed solution, results in various positive effects, such as a high-quality dispersion in the polymer matrix and addition of flexoelectricity to piezoelectricity, resulting in the enhancement of the output voltage by an external mechanical force. The NGs repeatedly generate an output voltage of 0.15 V. These results present a significant step toward the application of NGs using piezoelectric nanocomposite materials.

An equivalent dipole analysis of PZT ceramics and lead-free piezoelectric single crystals

Science.gov (United States)

Bell, Andrew J.

2016-04-01

The recently proposed Equivalent Dipole Model for describing the electromechanical properties of ionic solids in terms of 3 ions and 2 bonds has been applied to PZT ceramics and lead-free single crystal piezoelectric materials, providing analysis in terms of an effective ionic charge and the asymmetry of the interatomic force constants. For PZT it is shown that, as a function of composition across the morphotropic phase boundary, the dominant bond compliance peaks at 52% ZrO2. The stiffer of the two bonds shows little composition dependence with no anomaly at the phase boundary. The effective charge has a maximum value at 50% ZrO2, decreasing across the phase boundary region, but becoming constant in the rhombohedral phase. The single crystals confirm that both the asymmetry in the force constants and the magnitude of effective charge are equally important in determining the values of the piezoelectric charge coefficient and the electromechanical coupling coefficient. Both are apparently temperature dependent, increasing markedly on approaching the Curie temperature.

Piezoelectric ceramic (PZT) modulates axonal guidance growth of rat cortical neurons via RhoA, Rac1, and Cdc42 pathways.

Science.gov (United States)

Wen, Jianqiang; Liu, Meili

2014-03-01

Electrical stimulation is critical for axonal connection, which can stimulate axonal migration and deformation to promote axonal growth in the nervous system. Netrin-1, an axonal guidance cue, can also promote axonal guidance growth, but the molecular mechanism of axonal guidance growth under indirect electric stimulation is still unknown. We investigated the molecular mechanism of axonal guidance growth under piezoelectric ceramic lead zirconate titanate (PZT) stimulation in the primary cultured cortical neurons. PZT induced marked axonal elongation. Moreover, PZT activated the excitatory postsynaptic currents (EPSCs) by increasing the frequency and amplitude of EPSCs of the cortical neurons in patch clamp assay. PZT downregulated the expression of Netrin-1 and its receptor Deleted in Colorectal Cancer (DCC). Rho GTPase signaling is involved in interactions of Netrin-1 and DCC. PZT activated RhoA. Dramatic decrease of Cdc42 and Rac1 was also observed after PZT treatment. RhoA inhibitor Clostridium botulinum C3 exoenzyme (C3-Exo) prevented the PZT-induced downregulation of Netrin-1 and DCC. We suggest that PZT can promote axonal guidance growth by downregulation of Netrin-1 and DCC to mediate axonal repulsive responses via the Rho GTPase signaling pathway. Obviously, piezoelectric materials may provide a new approach for axonal recovery and be beneficial for clinical therapy in the future.

Modeling and characterization of dielectrophoretically structured piezoelectric composites using piezoceramic particle inclusions with high aspect ratios

Science.gov (United States)

van den Ende, D. A.; Maier, R. A.; van Neer, P. L. M. J.; van der Zwaag, S.; Randall, C. A.; Groen, W. A.

2013-01-01

In this work, the piezoelectric properties at high electric fields of dielectrophoretically aligned PZT—polymer composites containing high aspect ratio particles (such as short fibers) are presented. Polarization and strain as a function of electric field are evaluated. The properties of the composites are compared to those of PZT-polymer composites with equiaxed particles, continuous PZT fiber-polymer composites, and bulk PZT ceramics. From high-field polarization and strain measurements, the effective field dependent permittivity and piezoelectric charge constant in the poling direction are determined for dielectrophoresis structured PZT-polymer composites, continuous PZT fiber-polymer composites, and bulk PZT ceramics. The changes in dielectric properties of the inclusions and the matrix at high fields influence the dielectric and piezoelectric properties of the composites. It is found that the permittivity and piezoelectric charge constants increase towards a maximum at an applied field of around 2.5-5 kV/mm. The electric field at which the maximum occurs depends on the aspect ratio and degree of alignment of the inclusions. Experimental values of d33 at low and high applied fields are compared to a model describing the composites as a continuous polymer matrix containing PZT particles of various aspect ratios arranged into chains. Thickness mode coupling factors were determined from measured impedance data using fitted equivalent circuit model simulations. The relatively high piezoelectric strain constants, voltage constants, and thickness coupling factors indicate that such aligned short fiber composites could be useful as flexible large area transducers.

Compositional dependence of the Young's modulus and piezoelectric coefficient of (110)-oriented pulsed laser deposited PZT thin films

NARCIS (Netherlands)

Nazeer, H.; Nguyen, Duc Minh; Rijnders, Augustinus J.H.M.; Sardan Sukas, Ö.; Abelmann, Leon; Elwenspoek, Michael Curt

2014-01-01

In this contribution, we report on the compositional dependence of the mechanical and piezoelectric properties of Pb(ZrₓTi₿₋ₓ)O₃ (PZT) thin films fabricated by pulsed laser deposition (PLD). These films grow epitaxially on silicon with a (110) preferred orientation and have excellent piezoelectric

Clamping effect on the piezoelectric responses of screen-printed low temperature PZT/Polymer films on flexible substrates

Science.gov (United States)

Almusallam, A.; Yang, K.; Zhu, D.; Torah, R. N.; Komolafe, A.; Tudor, J.; Beeby, S. P.

2015-11-01

This paper introduces a new flexible lead zirconate titanate (PZT)/polymer composite material that can be screen-printed onto fabrics and flexible substrates, and investigates the clamping effect of these substrates on the characterization of the piezoelectric material. Experimental results showed that the optimum blend of PZT/polymer binder with a weight ratio of 12:1 provides a dielectric constant of 146. The measured value of the piezoelectric coefficient d33 was found to depend on the substrate used. Measured d33clp values of 70, 40, 36 pC N-1 were obtained from the optimum formulation printed on Polyester-cotton with an interface layer, Kapton and alumina substrates, respectively. The variation in the measured d33clp values occurs because of the effect of the mechanical boundary conditions of the substrate. The piezoelectric film is mechanically bonded to the surface of the substrate and this constrains the film in the plane of the substrate (the 1-direction). This constraint means that the perpendicular forces (applied in the 3-direction) used to measure d33 introduce a strain in the 1-direction that produces a charge of the opposite polarity to that induced by the d33 effect. This is due to the negative sign of the d31 coefficient and has the effect of reducing the measured d33 value. Theoretical and experimental investigations confirm a reduction of 13%, 50% and 55% in the estimated freestanding d33fs values (80 pC N-1) on Polyester-cotton, Kapton and alumina substrates, respectively. These results demonstrate the effect of the boundary conditions of the substrate/PZT interface on the piezoelectric response of the PZT/polymer film and in particular the reduced effect of fabric substrates due to their lowered stiffness.

Dielectric and piezoelectric properties of percolative three-phase piezoelectric polymer composites

Science.gov (United States)

Sundar, Udhay

Three-phase piezoelectric bulk composites were fabricated using a mix and cast method. The composites were comprised of lead zirconate titanate (PZT), aluminum (Al) and an epoxy matrix. The volume fraction of the PZT and Al were varied from 0.1 to 0.3 and 0.0 to 0.17, respectively. The influences of three entities on piezoelectric and dielectric properties: inclusion of an electrically conductive filler (Al), poling process (contact and Corona) and Al surface treatment, were observed. The piezoelectric strain coefficient, d33, effective dielectric constant, epsilon r, capacitance, C, and resistivity were measured and compared according to poling process, volume fraction of constituent phases and Al surface treatment. The maximum values of d33 were 3.475 and 1.0 pC/N for Corona and contact poled samples respectively, for samples with volume fractions of 0.40 and 0.13 of PZT and Al (surface treated) respectively. Also, the maximum dielectric constant for the surface treated Al samples was 411 for volume fractions of 0.40 and 0.13 for PZT and Al respectively. The percolation threshold was observed to occur at an Al volume fraction of 0.13. The composites achieved a percolated state for Al volume fractions >0.13 for both contact and corona poled samples. In addition, a comparative time study was conducted to examine the influence of surface treatment processing time of Al particles. The effectiveness of the surface treatment, sample morphology and composition was observed with the aid of SEM and EDS images. These images were correlated with piezoelectric and dielectric properties. PZT-epoxy-aluminum thick films (200 mum) were also fabricated using a two-step spin coat deposition and annealing method. The PZT volume fraction were varied from 0.2, 0.3 and 0.4, wherein the Aluminum volume fraction was varied from 0.1 to 0.17 for each PZT volume fraction, respectively. The two-step process included spin coating the first layer at 500 RPM for 30 seconds, and the second

Micro-particle manipulation by single beam acoustic tweezers based on hydrothermal PZT thick film.

Science.gov (United States)

Zhu, Benpeng; Xu, Jiong; Li, Ying; Wang, Tian; Xiong, Ke; Lee, Changyang; Yang, Xiaofei; Shiiba, Michihisa; Takeuchi, Shinichi; Zhou, Qifa; Shung, K Kirk

2016-03-01

Single-beam acoustic tweezers (SBAT), used in laboratory-on-a-chip (LOC) device has promising implications for an individual micro-particle contactless manipulation. In this study, a freestanding hydrothermal PZT thick film with excellent piezoelectric property (d 33 = 270pC/N and k t = 0.51) was employed for SBAT applications and a press-focusing technology was introduced. The obtained SBAT, acting at an operational frequency of 50MHz, a low f-number (∼0.9), demonstrated the capability to trap and manipulate a micro-particle sized 10μm in the distilled water. These results suggest that such a device has great potential as a manipulator for a wide range of biomedical and chemical science applications.

Biotemplated synthesis of PZT nanowires.

Science.gov (United States)

Cung, Kellye; Han, Booyeon J; Nguyen, Thanh D; Mao, Sheng; Yeh, Yao-Wen; Xu, Shiyou; Naik, Rajesh R; Poirier, Gerald; Yao, Nan; Purohit, Prashant K; McAlpine, Michael C

2013-01-01

Piezoelectric nanowires are an important class of smart materials for next-generation applications including energy harvesting, robotic actuation, and bioMEMS. Lead zirconate titanate (PZT), in particular, has attracted significant attention, owing to its superior electromechanical conversion performance. Yet, the ability to synthesize crystalline PZT nanowires with well-controlled properties remains a challenge. Applications of common nanosynthesis methods to PZT are hampered by issues such as slow kinetics, lack of suitable catalysts, and harsh reaction conditions. Here we report a versatile biomimetic method, in which biotemplates are used to define PZT nanostructures, allowing for rational control over composition and crystallinity. Specifically, stoichiometric PZT nanowires were synthesized using both polysaccharide (alginate) and bacteriophage templates. The wires possessed measured piezoelectric constants of up to 132 pm/V after poling, among the highest reported for PZT nanomaterials. Further, integrated devices can generate up to 0.820 μW/cm(2) of power. These results suggest that biotemplated piezoelectric nanowires are attractive candidates for stimuli-responsive nanosensors, adaptive nanoactuators, and nanoscale energy harvesters.

Towards a digital sound reconstruction MEMS device: Characterization of a single PZT based piezoelectric actuator

KAUST Repository

Carreno, Armando Arpys Arevalo; Conchouso Gonzalez, David; Castro, David; Jaber, Nizar; Younis, Mohammad I.; Foulds, Ian G.

2015-01-01

of acoustic actuators. These actuators consist of a flexible membrane fabricated using polyimide, which is actuated using a Lead-Zirconate-Titanate (PZT) piezoelectric ceramic layer working in the d31 actuation mode. The dimensions of the membrane are of 1mm

An equivalent dipole analysis of PZT ceramics and lead-free piezoelectric single crystals

Directory of Open Access Journals (Sweden)

Andrew J. Bell

2016-06-01

Full Text Available The recently proposed Equivalent Dipole Model for describing the electromechanical properties of ionic solids in terms of 3 ions and 2 bonds has been applied to PZT ceramics and lead-free single crystal piezoelectric materials, providing analysis in terms of an effective ionic charge and the asymmetry of the interatomic force constants. For PZT it is shown that, as a function of composition across the morphotropic phase boundary, the dominant bond compliance peaks at 52% ZrO2. The stiffer of the two bonds shows little composition dependence with no anomaly at the phase boundary. The effective charge has a maximum value at 50% ZrO2, decreasing across the phase boundary region, but becoming constant in the rhombohedral phase. The single crystals confirm that both the asymmetry in the force constants and the magnitude of effective charge are equally important in determining the values of the piezoelectric charge coefficient and the electromechanical coupling coefficient. Both are apparently temperature dependent, increasing markedly on approaching the Curie temperature.

A 2-D MEMS scanning mirror based on dynamic mixed mode excitation of a piezoelectric PZT thin film S-shaped actuator.

Science.gov (United States)

Koh, Kah How; Kobayashi, Takeshi; Lee, Chengkuo

2011-07-18

A novel dynamic excitation of an S-shaped PZT piezoelectric actuator, which is conceptualized by having two superimposed AC voltages, is characterized in this paper through the evaluation of the 2-D scanning characteristics of an integrated silicon micromirror. The device is micromachined from a SOI wafer with a 5 μm thick Si device layer and multilayers of Pt/Ti/PZT//Pt/Ti deposited as electrode and actuation materials. A large mirror (1.65 mm x 2mm) and an S-shaped PZT actuator are formed after the backside release process. Three modes of operation are investigated: bending, torsional and mixed. The resonant frequencies obtained for bending and torsional modes are 27Hz and 70Hz respectively. The maximum measured optical deflection angles obtained at 3Vpp are ± 38.9° and ± 2.1° respectively for bending and torsional modes. Various 2-D Lissajous patterns are demonstrated by superimposing two ac sinusoidal electrical signals of different frequencies (27 Hz and 70 Hz) into one signal to be used to actuate the mirror.

A comparative approach to predicting effective dielectric, piezoelectric and elastic properties of PZT/PVDF composites

International Nuclear Information System (INIS)

Ahmad, Zeeshan; Prasad, Ashutosh; Prasad, K.

2009-01-01

The present study addresses the problem of quantitative prediction of effective relative permittivity, dielectric loss factor, piezoelectric charge coefficient, and Young's modulus of PZT/PVDF diphasic ceramic-polymer composite as a function of volume fraction of PZT in the different compositions. Theoretical results for effective relative permittivity derived from several dielectric mixture equations like those of Knott, Rother-Lichtenecker, Bruggeman, Maxwell-Wagner-Webmann-Skipetrov or Dias-Dasgupta, Furukawa, Lewin, Wiener, Jayasundere-Smith, Modified Cule-Torquato, Taylor, Poon-Shin and Rao et al. were fitted to the experimental data taken from previous works of Yamada et al. Similarly, the results for effective piezoelectric coefficient and Young's modulus, derived from different appropriate equations were fitted to the corresponding experimental data taken from the literature. The study revealed that only a few equations like modified Rother-Lichtenecker equation, Dias-Dasgupta equation and Rao equation for dielectric and piezoelectric properties while the four new equations developed in the present study of elastic property (Young's modulus) well fitted the corresponding experimental results. Further, the acceptable data put to various regression analyses showed that in most of the cases the third order polynomial regression analysis provided more acceptable fits.

Study of the microstructure and the hardness of PZT piezoelectric ceramics types I and III used in electro acoustic transducers; Estudo da microestrutura e da microdureza das ceramicas piezoeletricas tipos PZT I e III utilizadas em transdutores eletroacusticos

Energy Technology Data Exchange (ETDEWEB)

Cabral, Ricardo de Freitas; Itaboray, Lucas Mendes; Santos, Anna Paula de Oliveira [Centro Universitario de Volta Redonda (UNIFOA), Volta Redonda, RJ (Brazil)

2015-12-15

The field of electronic processing of the ceramic piezoelectric type imported powdered led to the production of ceramics with 97% of theoretical density, homogeneous microstructure with great potential for applications in piezoelectric devices such as electro acoustic transducers. However, the production of electronic ceramics National piezoelectric type is not yet able to have as raw material zirconate titanate Lead (PZT) 100% made in Brazil. Thus, this is used for supply of domestic production, the zirconium oxide. In this work, both post PZT types I and III, imported, were uniaxially pressed at 70 MPa and sintered at 1200 and 1250 deg C for 3 hours. Hardness measurements were performed by micro indentation, X-ray diffraction analysis and Scanning Electron Microscopy. The hardness of PZT I was 393 HV. (author)

Micro-particle manipulation by single beam acoustic tweezers based on hydrothermal PZT thick film

Directory of Open Access Journals (Sweden)

Benpeng Zhu

2016-03-01

Full Text Available Single-beam acoustic tweezers (SBAT, used in laboratory-on-a-chip (LOC device has promising implications for an individual micro-particle contactless manipulation. In this study, a freestanding hydrothermal PZT thick film with excellent piezoelectric property (d33 = 270pC/N and kt = 0.51 was employed for SBAT applications and a press-focusing technology was introduced. The obtained SBAT, acting at an operational frequency of 50MHz, a low f-number (∼0.9, demonstrated the capability to trap and manipulate a micro-particle sized 10μm in the distilled water. These results suggest that such a device has great potential as a manipulator for a wide range of biomedical and chemical science applications.

Micro-particle manipulation by single beam acoustic tweezers based on hydrothermal PZT thick film

Energy Technology Data Exchange (ETDEWEB)

Zhu, Benpeng, E-mail: benpengzhu@hust.edu.cn [School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074 (China); State Key Laboratory of Transducer Technology, Chinese Academy of Sciences, Shanghai 200050 (China); Xu, Jiong; Yang, Xiaofei [School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074 (China); Li, Ying; Lee, Changyang; Zhou, Qifa; Shung, K. Kirk [Department of Biomedical Engineering and NIH Transducer Resource Center, University of Southern California, Los Angeles, California 90089-1111 (United States); Wang, Tian; Xiong, Ke [Department of Physics and Key Laboratory of Acoustic and Photonic Materials and Devices of Ministry of Education, Wuhan University, Wuhan 430072 (China); Shiiba, Michihisa; Takeuchi, Shinichi [Medical Engineering Course, Graduate School of Engineering, Toin University of Yokohama, Yokohama 225-8501 (Japan)

2016-03-15

Single-beam acoustic tweezers (SBAT), used in laboratory-on-a-chip (LOC) device has promising implications for an individual micro-particle contactless manipulation. In this study, a freestanding hydrothermal PZT thick film with excellent piezoelectric property (d{sub 33} = 270 pC/N and k{sub t} = 0.51) was employed for SBAT applications and a press-focusing technology was introduced. The obtained SBAT, acting at an operational frequency of 50 MHz, a low f-number (∼0.9), demonstrated the capability to trap and manipulate a micro-particle sized 10μm in the distilled water. These results suggest that such a device has great potential as a manipulator for a wide range of biomedical and chemical science applications.

Strongly Enhanced Piezoelectric Response in Lead Zirconate Titanate Films with Vertically Aligned Columnar Grains

Science.gov (United States)

2017-01-01

Pb(Zr0.52Ti0.48)O3 (PZT) films with (001) orientation were deposited on Pt(111)/Ti/SiO2/Si(100) substrates using pulsed laser deposition. Variation of the laser pulse rate during the deposition of the PZT films was found to play a key role in the control of the microstructure and to change strongly the piezoelectric response of the thin film. The film deposited at low pulse rate has a denser columnar microstructure, which improves the transverse piezoelectric coefficient (d31f) and ferroelectric remanent polarization (Pr), whereas the less densely packed columnar grains in the film deposited at high pulse rates give rise to a significantly higher longitudinal piezoelectric coefficient (d33f) value. The effect of film thickness on the ferroelectric and piezoelectric properties of the PZT films was also investigated. With increasing film thickness, the grain column diameter gradually increases, and also the average Pr and d33f values become larger. The largest piezoelectric coefficient of d33f = 408 pm V–1 was found for a 4-μm film thickness. From a series of films in the thickness range 0.5–5 μm, the z-position dependence of the piezoelectric coefficient could be deduced. A local maximum value of 600 pm V–1 was deduced in the 3.5–4.5 μm section of the thickest films. The dependence of the film properties on film thickness is attributed to the decreasing effect of the clamping constraint imposed by the substrate and the increasing spatial separation between the grains with increasing film thickness. PMID:28247756

Piezoelectric and dielectric characterization of corona and contact poled PZT-epoxy-MWCNT bulk composites

Science.gov (United States)

Banerjee, S.; Cook-Chennault, K. A.; Du, W.; Sundar, U.; Halim, H.; Tang, A.

2016-11-01

Three-phase lead zirconate titanate (PZT, PbZr0.52Ti0.48O3)-epoxy-multi-walled carbon nanotube (MWCNT) bulk composites were prepared, where the volume fraction of PZT was held constant at 30%, while the volume fraction of the MWCNTs was varied from 1.0%-10%. The samples were poled using either a parallel plate contact or contactless (corona) poling technique. The piezoelectric strain coefficient (d33), dielectric constant (ɛ), and dielectric loss tangent (tan δ) of the samples were measured at 110 Hz, and compared as a function of poling technique and volume fraction of MWCNTs. The highest values for dielectric constant and piezoelectric strain coefficients were 465.82 and 18.87 pC/N for MWCNT volume fractions of 10% and 6%, respectively. These values were obtained for samples that were poled using the corona contactless method. The impedance and dielectric spectra of the composites were recorded over a frequency range of 100 Hz-20 MHz. The impedance values observed for parallel-plate contact poled samples are higher than that of corona poled composites. The fractured surface morphology and distribution of the PZT particles and MWCNTs were observed with the aid of electron dispersion spectroscopy and a scanning electron microscope. The surface morphology of the MWCNTs was observed with the aid of a field emission transmission electron microscope.

Shear piezoelectric coefficients of PZT, LiNbO3 and PMN-PT at cryogenic temperatures

International Nuclear Information System (INIS)

Bukhari, Syed; Islam, Md; Haziot, Ariel; Beamish, John

2014-01-01

Piezoelectric transducers are used to detect stress and to generate nanometer scale displacements but their piezoelectric coefficients decrease with temperature, limiting their performance in cryogenic applications. We have developed a capacitive technique and directly measured the temperature dependence of the shear coefficient d 15 for ceramic lead zirconium titanate (PZT), 41° X-cut lithium niobate (LiNbO 3 ) and single crystal lead magnesium niobium-lead titanate (PMN-PT). In PZT, d 15 decreases nearly linearly with temperature, dropping by factor of about 4 by 1.3 K. LiNbO3 has the smallest room temperature d15, but its value decreased by only 6% at the lowest temperatures. PMN-PT had the largest value of d15 at room temperature (2.9 × 10 −9 m/V, about 45 times larger than for LiNbO 3 ) but it decreased rapidly below 75 K; at 1.3 K, d 15 was only about 8% of its room temperature value

The effect of calcining temperature on the properties of 0-3 piezoelectric composites of PZT and a liquid crystalline thermosetting polymer

NARCIS (Netherlands)

Ende, D.A. van den; Groen, W.A.; Zwaag, S. van der

2011-01-01

We report on the optimisation of a recently developed high performance 0-3 piezoelectric composite comprising of the piezoelectric Lead Zirconate Titanate (PZT) powder and a liquid crystalline thermosetting matrix polymer (LCT). The matrix polymer is a liquid crystalline polymer comprising of an

Precise measurement of the transverse piezoelectric coefficient for thin films on anisotropic substrate

International Nuclear Information System (INIS)

Chun, Doo-Man; Sato, Masashi; Kanno, Isaku

2013-01-01

In this study, we propose a reliable measurement method for the effective transverse piezoelectric coefficient for thin films especially on anisotropic substrate. This coefficient for piezoelectric Pb(Zr, Ti)O 3 (PZT) thin films was calculated by measuring the electric field-induced tip displacement of unimorph cantilevers composed of PZT thin films and Si substrates. We evaluated the reliability of the proposed measurement method by comparing it with numerical analysis and confirmed that the relative error of the piezoelectric coefficient (e 31,f ) was less than 1%. We prepared 16 different unimorph cantilevers composed of identical PZT films on different Si beam geometries that had various substrate thicknesses and cantilever widths. Although the effective transverse piezoelectric coefficient e 31,f of PZT thin films ranged from −6.5 to −14 C/m 2 as a function of the applied voltage, the difference among the 16 samples with an applied voltage of 25 V was within 10%. These results demonstrate that the proposed measurement method has sufficient reliability and can be used to evaluate the effective transverse piezoelectric coefficient e 31,f of thin films.

Piezoelectric response of a PZT thin film to magnetic fields from permanent magnet and coil combination

Science.gov (United States)

Guiffard, B.; Seveno, R.

2015-01-01

In this study, we report the magnetically induced electric field E 3 in Pb(Zr0.57Ti0.43)O3 (PZT) thin films, when they are subjected to both dynamic magnetic induction (magnitude B ac at 45 kHz) and static magnetic induction ( B dc) generated by a coil and a single permanent magnet, respectively. It is found that highest sensitivity to B dc——is achieved for the thin film with largest effective electrode. This magnetoelectric (ME) effect is interpreted in terms of coupling between eddy current-induced Lorentz forces (stress) in the electrodes of PZT and piezoelectricity. Such coupling was evidenced by convenient modelling of experimental variations of electric field magnitude with both B ac and B dc induction magnitudes, providing imperfect open circuit condition was considered. Phase angle of E 3 versus B dc could also be modelled. At last, the results show that similar to multilayered piezoelectric-magnetostrictive composite film, a PZT thin film made with a simple manufacturing process can behave as a static or dynamic magnetic field sensor. In this latter case, a large ME voltage coefficient of under B dc = 0.3 T was found. All these results may provide promising low-cost magnetic energy harvesting applications with microsized systems.

On the use of non-MPB lead zirconium titanate (PZT) granules for piezoelectric ceramic–polymer sensorial composites

NARCIS (Netherlands)

Shaji Karapuzha, A.; Kunnamkuzhakkal James, N.; van der Zwaag, S.; Groen, W.A.

2016-01-01

Modern flexible and sensitive sensors based on polymer–ceramic composites employ lead zirconate titanate (PZT) granulates having the morphotropic phase boundary (MPB) composition as the piezo active ingredient, as this composition gives the best properties in fully ceramic piezoelectric sensors.

On the use of non-MPB lead zirconium titanate (PZT) granules for piezoelectric ceramic–polymer sensorial composites

NARCIS (Netherlands)

Shaji Karapuzha, A.; Zwaag, S. van der; Groen, W.A.

2016-01-01

Modern flexible and sensitive sensors based on polymer–ceramic composites employ lead zirconate titanate (PZT) granulates having the morphotropic phase boundary (MPB) composition as the piezo active ingredient, as this composition gives the best properties in fully ceramic piezoelectric sensors. In

Large aperture deformable mirror with a transferred single-crystal silicon membrane actuated using large-stroke PZT Unimorph Actuators

Science.gov (United States)

Hishinumat, Yoshikazu; Yang, Eui - Hyeok (EH)

2005-01-01

We have demonstrated a large aperture (50 mm x 50 mm) continuous membrane deformable mirror (DM) with a large-stroke piezoelectric unimorph actuator array. The DM consists of a continuous, large aperture, silicon membrane 'transferred' in its entirety onto a 20 x 20 piezoelectric unimorph actuator array. A PZT unimorph actuator, 2.5 mm in diameter with optimized PZT/Si thickness and design showed a deflection of 5.7 [m at 20V. An assembled DM showed an operating frequency bandwidth of 30 kHz and influence function of approximately 30%.

Influences of donor dopants on the properties of PZT-PMS-PZN piezoelectric ceramics sintered at low temperatures

International Nuclear Information System (INIS)

Yoon, Seokjin; Choi, Jiwon; Choi, Jooyoung; Wan, Dandan; Li, Qian; Yang, Ying

2010-01-01

0.90Pb(Zr 0.48 Ti 0.52 )O 3 -0.05Pb(Mn 1/3 Sb 2/3 )O 3 -0.05Pb(Zn 1/3 Nb 2/3 )O 3 quaternary piezoelectric ceramics with CuO added were synthesized by using a conventional method at low sintering temperatures. CuO additive, 1.0 wt%, significantly improves the sinterability of 0.90PZT-0.05PMS-0.05PZN ceramics, lowering the sintering temperature to 900 .deg. C and showing moderate electrical properties: d 33 = 306 pC/N, Q m = 997, k p = 53.6%, tanδ = 0.50%, and ε T 33 = 1351. To obtain more optimal piezoelectric properties, we selected Bi 2 O 3 and Nb 2 O 5 as donor dopants to introduce a softening effect. The crystal structure, micro-morphology and electrical properties were studied in terms of the Bi 2 O 3 and the Nb 2 O 5 contents. Our study demonstrates that Bi 2 O 3 is very effective in improving the piezoelectric properties, causing a significant enhancement in d 33 and k p values. Particularly, 0.75-wt%-Bi 2 O 3 -added 0.90PZT-0.05PMS-0.05PZN + 1.0 wt% CuO ceramics show excellent electrical properties: d 33 = 363 pC/N, Q m = 851, k p = 59.3%, tanδ = 0.38%, and ε T 33 = 1596. On the other hand, the effect of Nb 2 O 5 on the piezoelectric properties is very complicated, 0.50 wt% Nb 2 O 5 doped 0.90PZT-0.05PMS-0.05PZN + 1.0 wt% CuO ceramics have a remarkable improvement in k p value and maintain good electrical properties: d 33 = 300 pC/N, Q m = 971, k p = 58.4%, tanδ = 0.36%, and ε T 33 = 1332.

Design and fabrication of aspherical bimorph PZT optics

CERN Document Server

Tseng, T C; Yeh, Z C; Perng, S Y; Wang, D J; Kuan, C K; Chen, J R; Chen, C T

2001-01-01

Bimorph piezoelectric optics with a third-order-polynomial surface is designed and a prototype is fabricated as active optics. Two pairs of silicon (Si) and lead zirconate titanate (PZT) piezoelectric ceramic are bonded as Si-PZT-PZT-Si together with a multi-electrode or thin film resistor coating used as the control electrode between Si and PZT and metallic films as grounding between the interface of PZT ceramics. A linear voltage is applied to the bimorph PZT optics by probing the control electrodes from a two-channel controllable power supplier. In doing so, the optics surface can achieve a desired third-order-polynomial surface. Reducing hysteresis and creep in bimorph PZT X-ray optics is the only feasible way by inserting an appropriate capacitor in series with bimorph PZT optics to significantly reduce both effects.

Transverse piezoelectric coefficient measurement of flexible lead zirconate titanate thin films

Energy Technology Data Exchange (ETDEWEB)

Dufay, T.; Guiffard, B.; Seveno, R. [LUNAM Université, Université de Nantes, IETR (Institut d' Électronique et de Télécommunications de Rennes), UMR CNRS 6164, 2 rue de la Houssinière, BP 92208, 44322 Nantes Cedex 3 (France); Thomas, J.-C. [LUNAM Université, Université de Nantes-École Centrale Nantes, GeM (Institut de Recherche en Génie Civil et Ingénierie Mécanique), UMR CNRS 6183, 2 rue de la Houssinière, BP 92208, 44322 Nantes Cedex 3 (France)

2015-05-28

Highly flexible lead zirconate titanate, Pb(Zr,Ti)O{sub 3} (PZT), thin films have been realized by modified sol-gel process. The transverse piezoelectric coefficient d{sub 31} was determined from the tip displacement of bending-mode actuators made of PZT cantilever deposited onto bare or RuO{sub 2} coated aluminium substrate (16 μm thick). The influence of the thickness of ruthenium dioxide RuO{sub 2} and PZT layers was investigated for Pb(Zr{sub 0.57}Ti{sub 0.43})O{sub 3}. The modification of Zr/Ti ratio from 40/60 to 60/40 was done for 3 μm thick PZT thin films onto aluminium (Al) and Al/RuO{sub 2} substrates. A laser vibrometer was used to measure the beam displacement under controlled electric field. The experimental results were fitted in order to find the piezoelectric coefficient. Very large tip deflections of about 1 mm under low voltage (∼8 V) were measured for every cantilevers at the resonance frequency (∼180 Hz). For a given Zr/Ti ratio of 58/42, it was found that the addition of a 40 nm thick RuO{sub 2} interfacial layer between the aluminium substrate and the PZT layer induces a remarkable increase of the d{sub 31} coefficient by a factor of 2.7, thus corresponding to a maximal d{sub 31} value of 33 pC/N. These results make the recently developed PZT/Al thin films very attractive for both low frequency bending mode actuating applications and vibrating energy harvesting.

Comparison of effective transverse piezoelectric coefficients e31,f of Pb(Zr,Ti)O3 thin films between direct and converse piezoelectric effects

Science.gov (United States)

Tsujiura, Yuichi; Kawabe, Saneyuki; Kurokawa, Fumiya; Hida, Hirotaka; Kanno, Isaku

2015-10-01

We evaluated the effective transverse piezoelectric coefficients (e31,f) of Pb(Zr,Ti)O3 (PZT) thin films from both the direct and converse piezoelectric effects of unimorph cantilevers. (001) preferentially oriented polycrystalline PZT thin films and (001)/(100) epitaxial PZT thin films were deposited on (111)Pt/Ti/Si and (001)Pt/MgO substrates, respectively, by rf-magnetron sputtering, and their piezoelectric responses owing to intrinsic and extrinsic effects were examined. The direct and converse |e31,f| values of the polycrystalline PZT thin films were calculated as 6.4 and 11.5-15.0 C/m2, respectively, whereas those of the epitaxial PZT thin films were calculated as 3.4 and 4.6-4.8 C/m2, respectively. The large |e31,f| of the converse piezoelectric property of the polycrystalline PZT thin films is attributed to extrinsic piezoelectric effects. Furthermore, the polycrystalline PZT thin films show a clear nonlinear piezoelectric contribution, which is the same as the Rayleigh-like behavior reported in bulk PZT. In contrast, the epitaxial PZT thin films on the MgO substrate show a piezoelectric response owing to the intrinsic and linear extrinsic effects, and no nonlinear contribution was observed.

Ferroelectricity, Piezoelectricity, and Dielectricity of 0.06PMnN-0.94PZT(45/55 Thin Film on Silicon Substrate

Directory of Open Access Journals (Sweden)

Tao Zhang

2015-01-01

Full Text Available The high piezoelectricity and high quality factor ferroelectric thin films are important for electromechanical applications especially the micro electromechanical system (MEMS. The ternary compound ferroelectric thin films 0.06Pb(Mn1/3, Nb2/3O3 + 0.94Pb(Zr0.45, Ti0.55O3 (0.06PMnN-0.94PZT(45/55 were deposited on silicon(100 substrates by RF magnetron sputtering method considering that Mn and Nb doping will improve PZT properties in this research. For comparison, nondoped PZT(45/55 films were also deposited. The results show that both of thin films show polycrystal structures with the main (111 and (101 orientations. The transverse piezoelectric coefficients are e31,eff=−4.03 C/m2 and e31,eff=-3.5 C/m2, respectively. These thin films exhibit classical ferroelectricity, in which the coercive electric field intensities are 2Ec=147.31 kV/cm and 2Ec=135.44 kV/cm, and the saturation polarization Ps=30.86 μC/cm2 and Ps=17.74 μC/cm2, and the remnant polarization Pr=20.44 μC/cm2 and Pr=9.87 μC/cm2, respectively. Moreover, the dielectric constants and loss are εr=681 and D=5% and εr=537 and D=4.3%, respectively. In conclusion, 0.06PMnN-0.94PZT(45/55 thin films act better than nondoped films, even though their dielectric constants are higher. Their excellent ferroelectricity, piezoelectricity, and high power and energy storage property, especially the easy fabrication, integration realizable, and potentially high quality factor, make this kind of thin films available for the realistic applications.

Enhanced pyroelectric and piezoelectric properties of PZT with aligned porosity for energy harvesting applications† †Electronic supplementary information (ESI) available. See DOI: 10.1039/c7ta00967d Click here for additional data file.

Science.gov (United States)

Zhang, Yan; Xie, Mengying; Roscow, James; Bao, Yinxiang; Zhou, Kechao

2017-01-01

This paper demonstrates the significant benefits of exploiting highly aligned porosity in piezoelectric and pyroelectric materials for improved energy harvesting performance. Porous lead zirconate (PZT) ceramics with aligned pore channels and varying fractions of porosity were manufactured in a water-based suspension using freeze-casting. The aligned porous PZT ceramics were characterized in detail for both piezoelectric and pyroelectric properties and their energy harvesting performance figures of merit were assessed parallel and perpendicular to the freezing direction. As a result of the introduction of porosity into the ceramic microstructure, high piezoelectric and pyroelectric harvesting figures of merits were achieved for porous freeze-cast PZT compared to dense PZT due to the reduced permittivity and volume specific heat capacity. Experimental results were compared to parallel and series analytical models with good agreement and the PZT with porosity aligned parallel to the freezing direction exhibited the highest piezoelectric and pyroelectric harvesting response; this was a result of the enhanced interconnectivity of the ferroelectric material along the poling direction and reduced fraction of unpoled material that leads to a higher polarization. A complete thermal energy harvesting system, composed of a parallel-aligned PZT harvester element and an AC/DC converter, was successfully demonstrated by charging a storage capacitor. The maximum energy density generated by the 60 vol% porous parallel-connected PZT when subjected to thermal oscillations was 1653 μJ cm–3, which was 374% higher than that of the dense PZT with an energy density of 446 μJ cm–3. The results are beneficial for the design and manufacture of high performance porous pyroelectric and piezoelectric materials in devices for energy harvesting and sensor applications. PMID:28580142

Large piezoelectric strain with ultra-low strain hysteresis in highly c-axis oriented Pb(Zr0.52Ti0.48)O3 films with columnar growth on amorphous glass substrates.

Science.gov (United States)

Nguyen, Minh D; Houwman, Evert P; Rijnders, Guus

2017-10-10

Thin films of PbZr 0 . 52 Ti 0 . 48 O 3 (PZT) with largely detached columnar grains, deposited by pulsed laser deposition (PLD) on amorphous glass substrates covered with Ca 2 Nb 3 O 10 nanosheets as growth template and using LaNiO 3 electrode layers, are shown to exhibit very high unipolar piezoelectric strain and ultra-low strain hysteresis. The observed increase of the piezoelectric coefficient with increasing film thickness is attributed to the reduction of clamping, because of the increasingly less dense columnar microstructure (more separation between the grains) with across the film thickness. A very large piezoelectric coefficient (490 pm/V) and a high piezoelectric strain (~0.9%) are obtained in 4-µm-thick film under an applied electric field of 200 kV/cm, which is several times larger than in usual PZT ceramics. Further very low strain hysteresis (H≈2-4%) is observed in 4 to 5 µm thick films. These belong to the best values demonstrated so far in piezoelectric films. Fatigue testing shows that the piezoelectric properties are stable up to 10 10 cycles. The growth of high quality PZT films with very large strain and piezoelectric coefficients, very low hysteresis and with long-term stability on a technologically important substrate as glass is of great significance for the development of practical piezo driven microelectromechanical actuator systems.

Circular Piezoelectric Accelerometer for High Band Width Application

DEFF Research Database (Denmark)

Hindrichsen, Christian Carstensen; Larsen, Jack; Lou-Møller, Rasmus

2009-01-01

An uniaxial bulk-micromachined piezoelectric MEMS accelerometer intended for high bandwidth application is fabricated and characterized. A circular seismic mass (radius = 1200 ¿m) is suspended by a 20 ¿m thick annular silicon membrane (radius = 1800 ¿m). A 24 ¿m PZT screen printed thick film...... is used as the sensing material on top of the silicon membrane. Accelerations in the out of plane direction induce a force on the seismic mass bending the membrane and a potential difference is measured in the out of plane direction of the stressed PZT. A resonance frequency of 23.50 kHz, a charge...

Shear wave propagation in piezoelectric-piezoelectric composite layered structure

Directory of Open Access Journals (Sweden)

Anshu Mli Gaur

Full Text Available The propagation behavior of shear wave in piezoelectric composite structure is investigated by two layer model presented in this approach. The composite structure comprises of piezoelectric layers of two different materials bonded alternatively. Dispersion equations are derived for propagation along the direction normal to the layering and in direction of layering. It has been revealed that thickness and elastic constants have significant influence on propagation behavior of shear wave. The phase velocity and wave number is numerically calculated for alternative layer of Polyvinylidene Difluoride (PVDF and Lead Zirconate Titanate (PZT-5H in composite layered structure. The analysis carried out in this paper evaluates the effect of volume fraction on the phase velocity of shear wave.

Piezoelectric response of a PZT thin film to magnetic fields from permanent magnet and coil combination

Energy Technology Data Exchange (ETDEWEB)

Guiffard, B.; Seveno, R. [Universite de Nantes, Lunam Universite, IETR UMR CNRS 6164, Nantes (France)

2014-07-10

In this study, we report the magnetically induced electric field E{sub 3} in Pb(Zr{sub 0.57}Ti{sub 0.43})O{sub 3} (PZT) thin films, when they are subjected to both dynamic magnetic induction (magnitude B{sub ac} at 45 kHz) and static magnetic induction (B{sub dc}) generated by a coil and a single permanent magnet, respectively. It is found that highest sensitivity to B{sub dc} - Δ vertical stroke E{sub 3} vertical stroke ΔB{sub dc} - is achieved for the thin film with largest effective electrode. This magnetoelectric (ME) effect is interpreted in terms of coupling between eddy current-induced Lorentz forces (stress) in the electrodes of PZT and piezoelectricity. Such coupling was evidenced by convenient modelling of experimental variations of electric field magnitude with both B{sub ac} and B{sub dc} induction magnitudes, providing imperfect open circuit condition was considered. Phase angle of E{sub 3} versus B{sub dc} could also be modelled. At last, the results show that similar to multilayered piezoelectric-magnetostrictive composite film, a PZT thin film made with a simple manufacturing process can behave as a static or dynamic magnetic field sensor. In this latter case, a large ME voltage coefficient of α = vertical stroke E{sub 3} vertical stroke /B{sub ac} = 3.55 V/cm Oe under B{sub dc} = 0.3 T was found. All these results may provide promising low-cost magnetic energy harvesting applications with microsized systems. (orig.)

Study on the sandwich piezoelectric ceramic ultrasonic transducer in thickness vibration

International Nuclear Information System (INIS)

Lin Shuyu; Tian Hua

2008-01-01

A sandwich piezoelectric ceramic ultrasonic transducer in thickness vibration is studied. The transducer consists of front and back metal masses, and coaxially segmented, thickness polarized piezoelectric ceramic thin rings. For this kind of sandwich piezoelectric transducers in thickness vibration, it is required that the lateral dimension of the transducer is sufficiently large compared with its longitudinal dimension so that no lateral displacements in the transducer can occur (laterally clamped). In this paper, the thickness vibration of the piezoelectric ceramic stack consisting of a number of identical piezoelectric ceramic thin rings is analysed and its electro-mechanical equivalent circuit is obtained. The resonance frequency equation for the sandwich piezoelectric ceramic ultrasonic transducer in thickness vibration is derived. Based on the frequency equation, two sandwich piezoelectric ceramic ultrasonic transducers are designed and manufactured, and their resonance frequencies are measured. It is shown that the measured resonance frequencies are in good agreement with the theoretical results. This kind of sandwich piezoelectric ultrasonic transducer is expected to be used in megasonic ultrasonic cleaning and sonochemistry where high power and high frequency ultrasound is needed

Development of Novel Piezoelectric Biosensor Using PZT Ceramic Resonator for Detection of Cancer Markers.

Science.gov (United States)

Su, Li; Fong, Chi-Chun; Cheung, Pik-Yuan; Yang, Mengsu

2017-01-01

A novel biosensor based on piezoelectric ceramic resonator was developed for direct detection of cancer markers in the study. For the first time, a commercially available PZT ceramic resonator with high resonance frequency was utilized as transducer for a piezoelectric biosensor. A dual ceramic resonators scheme was designed wherein two ceramic resonators were connected in parallel: one resonator was used as the sensing unit and the other as the control unit. This arrangement minimizes environmental influences including temperature fluctuation, while achieving the required frequency stability for biosensing applications. The detection of the cancer markers Prostate Specific Antigen (PSA) and α-Fetoprotein (AFP) was carried out through frequency change measurement. The device showed high sensitivity (0.25 ng/ml) and fast detection (within 30 min) with small samples (1 μl), which is compatible with the requirements of clinical measurements. The results also showed that the ceramic resonator-based piezoelectric biosensor platform could be utilized with different chemical interfaces, and had the potential to be further developed into biosensor arrays with different specificities for simultaneous detection of multiple analytes.

Generation of electrical energy using lead zirconate titanate (PZT-5A) piezoelectric material: Analytical, numerical and experimental verifications

Energy Technology Data Exchange (ETDEWEB)

Butt, Zubair; Ahmad, Nasir [Dept. of Mechanical, Mechatronics and Manufacturing Engineering, UET Lahore, Faisalabad Campus, Lahore (Pakistan); Pasha, Riffat Asim; Qayyum, Faisal; Anjum, Zeeshan [Dept. of Mechanical Engineering, University of Engineering and Technology, Taxila (Pakistan); Elahi, Hassan [Northwestern Polytechnical University, Xian (China)

2016-08-15

Energy harvesting is the process of attaining energy from the external sources and transforming it into usable electrical energy. An analytical model of piezoelectric energy harvester has been developed to determine the output voltage across an electrical circuit when it is forced to undergo a base excitation. This model gives an easy approach to design and investigate the behavior of piezoelectric material. Numerical simulations have been carried out to determine the effect of frequency and loading on a Lead zirconate titanate (PZT-5A) piezoelectric material. It has been observed that the output voltage from the harvester increases when loading increases whereas its resonance frequency decreases. The analytical results were found to be in good agreement with the experimental and numerical simulation results.

Hyperfine interaction measurements on ceramics: PZT revisited

International Nuclear Information System (INIS)

Guarany, Cristiano A.; Araujo, Eudes B.; Silva, Paulo R.J.; Saitovitch, Henrique

2007-01-01

The solid solution of PbZr 1- x Ti x O 3 , known as lead-zirconate titanate (PZT), was probably one of the most studied ferroelectric materials, especially due to its excellent dielectric, ferroelectric and piezoelectric properties. The highest piezoelectric coefficients of the PZT are found near the morphotropic phase boundary (MPB) (0.46≤x≤0.49), between the tetragonal and rhombohedral regions of the composition-temperature phase diagram. Recently, a new monoclinic phase near the MPB was observed, which can be considered as a 'bridge' between PZT's tetragonal and rhombohedral phases. This work is concerned with the study of the structural properties of the ferroelectric PZT (Zr/Ti=52/48, 53/47) by hyperfine interaction (HI) measurements obtained from experiments performed by using the nuclear spectroscopy time differential perturbed angular correlation (TDPAC) in a wide temperature range

Temperature Dependent Electrical Properties of PZT Wafer

Science.gov (United States)

Basu, T.; Sen, S.; Seal, A.; Sen, A.

2016-04-01

The electrical and electromechanical properties of lead zirconate titanate (PZT) wafers were investigated and compared with PZT bulk. PZT wafers were prepared by tape casting technique. The transition temperature of both the PZT forms remained the same. The transition from an asymmetric to a symmetric shape was observed for PZT wafers at higher temperature. The piezoelectric coefficient (d 33) values obtained were 560 pc/N and 234 pc/N, and the electromechanical coupling coefficient (k p) values were 0.68 and 0.49 for bulk and wafer, respectively. The reduction in polarization after fatigue was only ~3% in case of PZT bulk and ~7% for PZT wafer.

Screen printed thick film based pMUT arrays

DEFF Research Database (Denmark)

Hedegaard, Tobias; Pedersen, T; Thomsen, Erik Vilain

2008-01-01

This article reports on the fabrication and characterization of lambda-pitched piezoelectric micromachined ultrasound transducer (pMUT) arrays fabricated using a unique process combining conventional silicon technology and low cost screen printing of thick film PZT. The pMUTs are designed as 8...

Impedance Based Characterization of a High-Coupled Screen Printed PZT Thick Film Unimorph Energy Harvester

DEFF Research Database (Denmark)

Lei, Anders; Xu, R.; Borregaard, L. M.

2014-01-01

The single degree of freedom mass-spring-damper system is the most common approach for deriving a full electromechanical model for the piezoelectric vibration energy harvester. In this paper, we revisit this standard electromechanical model by focusing on the impedance of the piezoelectric device...... parameters which, by means of the piezoelectric impedance expression, all can be determined accurately by electrical measurements. It is shown how four of five lumped parameters can be determined from a single impedance measurement scan, considerably reducing the characterization effort. The remaining...... parameter is determined from shaker measurements, and a highly accurate agreement is found between model and measurements on a unimorph MEMS-based screen printed PZT harvester. With a high coupling term K-2 Q similar or equal to 7, the harvester exhibits two optimum load points. The peak power performance...

Hyperfine interaction measurements on ceramics: PZT revisited

Energy Technology Data Exchange (ETDEWEB)

Guarany, Cristiano A. [Universidade Estadual Paulista (Unesp), Departmento de Fisica Quimica, Caixa Postal 31, 15.385-000 Ilha Solteira, SP (Brazil); Araujo, Eudes B. [Universidade Estadual Paulista (Unesp), Departmento de Fisica Quimica, Caixa Postal 31, 15.385-000 Ilha Solteira, SP (Brazil); Silva, Paulo R.J. [Centro Brasileiro de Pesquisas Fisicas-Rua Dr. Xavier Sigaud, 150, 22290-180 Rio de Janeiro, RJ (Brazil); Saitovitch, Henrique [Centro Brasileiro de Pesquisas Fisicas-Rua Dr. Xavier Sigaud, 150, 22290-180 Rio de Janeiro, RJ (Brazil)]. E-mail: henrique@cbpf.br

2007-02-01

The solid solution of PbZr{sub 1-} {sub x} Ti {sub x} O{sub 3}, known as lead-zirconate titanate (PZT), was probably one of the most studied ferroelectric materials, especially due to its excellent dielectric, ferroelectric and piezoelectric properties. The highest piezoelectric coefficients of the PZT are found near the morphotropic phase boundary (MPB) (0.46{<=}x{<=}0.49), between the tetragonal and rhombohedral regions of the composition-temperature phase diagram. Recently, a new monoclinic phase near the MPB was observed, which can be considered as a 'bridge' between PZT's tetragonal and rhombohedral phases. This work is concerned with the study of the structural properties of the ferroelectric PZT (Zr/Ti=52/48, 53/47) by hyperfine interaction (HI) measurements obtained from experiments performed by using the nuclear spectroscopy time differential perturbed angular correlation (TDPAC) in a wide temperature range.

Interfacial morphology and domain configurations in 0-3 PZT-Portland cement composites

International Nuclear Information System (INIS)

Jaitanong, N.; Zeng, H.R.; Li, G.R.; Yin, Q.R.; Vittayakorn, W.C.; Yimnirun, R.; Chaipanich, A.

2010-01-01

Cement-based piezoelectric composites have attracted great attention recently due to their promising applications as sensors in smart structures. Lead zirconate titanate (PZT) and Portland cement (PC) composite were fabricated using 60% of PZT by volume. Scanning Electron Microscope and piezoresponse force microscope were used to investigate the morphology and domain configurations at the interfacial zone of PZT-Portland cement composites. Angular PZT ceramic grains were found to bind well with the cement matrix. The submicro-scale domains were clearly observed by piezoresponse force microscope at the interfacial regions between the piezoelectric PZT phase and Portland cement phase, and are clearer than the images obtained for pure PZT. This is thought to be due to the applied internal stress of cement to the PZT ceramic particle which resulted to clearer images.

Optimized electrode coverage of membrane actuators based on epitaxial PZT thin films

International Nuclear Information System (INIS)

Nguyen, M D; Dekkers, M; Blank, D H A; Rijnders, G; Nazeer, H

2013-01-01

This research presents an optimization of piezoelectric membrane actuators by maximizing the actuator displacement. Membrane actuators based on epitaxial Pb(Zr,Ti)O 3 thin films grown on all-oxide electrodes and buffer layers using silicon technology were fabricated. Electrode coverage was found to be an important factor in the actuation displacement of the piezoelectric membranes. The optimum electrode coverage for maximum displacement was theoretically determined to be 39%, which is in good agreement with the experimental results. Dependences of membrane displacement and optimum electrode coverage on membrane diameter and PZT-film/Si-device-layer thickness ratio have also been investigated. (paper)

High-performance piezoelectric thick film based energy harvesting micro-generators for MEMS

DEFF Research Database (Denmark)

Zawada, Tomasz; Hansen, Karsten; Lou-Moeller, Rasmus

2010-01-01

and are transformed by the energy harvesting micro-generator into usable electrical signal. The micro-generator comprises a silicon cantilever with integrated InSensor® TF2100 PZT thick film deposited using screen-printing. The output power versus frequency and electrical load has been investigated. Furthermore......, devices based on modified, pressure treated thick film materials have been tested and compared with the commercial InSensor® TF2100 PZT thick films. It has been found that the structures based on the pressure treated materials exhibit superior properties in terms of energy output....

Piezo-generated charge mapping revealed through direct piezoelectric force microscopy.

Science.gov (United States)

Gomez, A; Gich, M; Carretero-Genevrier, A; Puig, T; Obradors, X

2017-10-24

While piezoelectric and ferroelectric materials play a key role in many everyday applications, there are still a number of open questions related to their physics. To enhance our understanding of piezoelectrics and ferroelectrics, nanoscale characterization is essential. Here, we develop an atomic force microscopy based mode that obtains a direct quantitative analysis of the piezoelectric coefficient d 33 . We report nanoscale images of piezogenerated charge in a thick single crystal of periodically poled lithium niobate (PPLN), a bismuth ferrite (BiFO 3 ) thin film, and lead zirconate titanate (PZT) by applying a force and recording the current produced by these materials. The quantification of d 33 coefficients for PPLN (14 ± 3 pC per N) and BFO (43 ± 6 pC per N) is in agreement with the values reported in the literature. Even stronger evidence of the reliability of the method is provided by an equally accurate measurement of the significantly larger d 33 of PZT.

1.6 V nanogenerator for mechanical energy harvesting using PZT nanofibers.

Science.gov (United States)

Chen, Xi; Xu, Shiyou; Yao, Nan; Shi, Yong

2010-06-09

Energy harvesting technologies that are engineered to miniature sizes, while still increasing the power delivered to wireless electronics, (1, 2) portable devices, stretchable electronics, (3) and implantable biosensors, (4, 5) are strongly desired. Piezoelectric nanowire- and nanofiber-based generators have potential uses for powering such devices through a conversion of mechanical energy into electrical energy. (6) However, the piezoelectric voltage constant of the semiconductor piezoelectric nanowires in the recently reported piezoelectric nanogenerators (7-12) is lower than that of lead zirconate titanate (PZT) nanomaterials. Here we report a piezoelectric nanogenerator based on PZT nanofibers. The PZT nanofibers, with a diameter and length of approximately 60 nm and 500 microm, were aligned on interdigitated electrodes of platinum fine wires and packaged using a soft polymer on a silicon substrate. The measured output voltage and power under periodic stress application to the soft polymer was 1.63 V and 0.03 microW, respectively.

Modelling of magneto-acoustic resonance in ferrite-piezoelectric bilayers

Energy Technology Data Exchange (ETDEWEB)

Bichurin, M I; Petrov, V M; Averkin, S V; Filippov, A V [Institute for Electronic Information Systems, Novgorod State University, Veliky Novgorod 173003 (Russian Federation); Liverts, E [Department of Physics, Ben-Gurion University of the Negev, Beersheva 84105 (Israel); Mandal, S; Srinivasan, G [Physics Department, Oakland University, Rochester, MI 48309 (United States)

2009-11-07

A model is discussed for magnetoelectric (ME) effects in a single-crystal ferrite-piezoelectric bilayer on a substrate. The specific focus is on coupling at magneto-acoustic resonance (MAR) at the coincidence of ferromagnetic resonance in the ferrite and thickness modes of the electromechanical resonance in the piezoelectric. The clamping effect of the substrate has been considered in determining the ME voltage coefficient and applied to a model system of a bilayer of lead zirconate titanate (PZT) and yttrium iron garnet (YIG) on a gadolinium gallium garnet substrate. The theory predicts a giant ME effect at MAR due to interaction and transfer of energy between elastic modes and the uniform precession spin-wave mode. It is shown that the ME coupling strength decreases with increasing substrate thickness. Estimates for YIG-PZT for nominal film parameters predict MAR at 5 GHz and ME coefficients on the order of 5-70 V cm{sup -1} Oe{sup -1}. The phenomenon is of importance for the realization of multifunctional ME sensors and transducers operating at microwave frequencies.

Simulation Study on Material Property of Cantilever Piezoelectric Vibration Generator

Directory of Open Access Journals (Sweden)

Yan Zhen

2014-06-01

Full Text Available For increasing generating capacity of cantilever piezoelectric vibration generator with limited volume, relation between output voltage, inherent frequency and material parameter of unimorph, bimorph in series type and bimorph in parallel type piezoelectric vibration generator is analyzed respectively by mechanical model and finite element modeling. The results indicate PZT-4, PZT- 5A and PZT-5H piezoelectric materials and stainless steel, nickel alloy substrate material should be firstly chosen.

Integration of bulk piezoelectric materials into microsystems

Science.gov (United States)

Aktakka, Ethem Erkan

Bulk piezoelectric ceramics, compared to deposited piezoelectric thin-films, provide greater electromechanical coupling and charge capacity, which are highly desirable in many MEMS applications. In this thesis, a technology platform is developed for wafer-level integration of bulk piezoelectric substrates on silicon, with a final film thickness of 5-100microm. The characterized processes include reliable low-temperature (200°C) AuIn diffusion bonding and parylene bonding of bulk-PZT on silicon, wafer-level lapping of bulk-PZT with high-uniformity (+/-0.5microm), and low-damage micro-machining of PZT films via dicing-saw patterning, laser ablation, and wet-etching. Preservation of ferroelectric and piezoelectric properties is confirmed with hysteresis and piezo-response measurements. The introduced technology offers higher material quality and unique advantages in fabrication flexibility over existing piezoelectric film deposition methods. In order to confirm the preserved bulk properties in the final film, diaphragm and cantilever beam actuators operating in the transverse-mode are designed, fabricated and tested. The diaphragm structure and electrode shapes/sizes are optimized for maximum deflection through finite-element simulations. During tests of fabricated devices, greater than 12microm PP displacement is obtained by actuation of a 1mm2 diaphragm at 111kHz with integration of a 50-80% efficient power management IC, which incorporates a supply-independent bias circuitry, an active diode for low-dropout rectification, a bias-flip system for higher efficiency, and a trickle battery charger. The overall system does not require a pre-charged battery, and has power consumption of <1microW in active-mode (measured) and <5pA in sleep-mode (simulated). Under lg vibration at 155Hz, a 70mF ultra-capacitor is charged from OV to 1.85V in 50 minutes.

Comparison of the Thermal Degradation of Heavily Nb-Doped and Normal PZT Thin Films.

Science.gov (United States)

Yang, Jeong-Suong; Kang, YunSung; Kang, Inyoung; Lim, SeungMo; Shin, Seung-Joo; Lee, JungWon; Hur, Kang Heon

2017-03-01

The degradation of niobium-doped lead zirconate titanate (PZT) and two types of PZT thin films were investigated. Undoped PZT, two-step PZT, and heavily Nb-doped PZT (PNZT) around the morphotropic phase boundary were in situ deposited under optimum condition by RF-magnetron sputtering. All 2- [Formula: see text]-thick films had dense perovskite columnar grain structure and self-polarized (100) dominant orientation. PZT thin films were deposited on Pt/TiO x bottom electrode on Si wafer, and PNZT thin film was on Ir/TiW electrode with the help of orientation control. Sputtered PZT films formed on microelectromechanical system (MEMS) gyroscope and the degradation rates were compared at different temperatures. PNZT showed the best resistance to the thermal degradation, followed by two-step PZT. To clarify the effect of oxygen vacancies on the degradation of the film at high temperature, photoluminescence measurement was conducted, which confirmed that oxygen vacancy rate was the lowest in heavy PNZT. Nb-doping PZT thin films suppressed the oxygen deficit and made high imprint with self-polarization. This defect distribution and high internal field allowed PNZT thin film to make the piezoelectric sensors more stable and reliable at high temperature, such as reflow process of MEMS packaging.

Effect of electrical and mechanical poling history on domain orientation and piezoelectric properties of soft and hard PZT ceramics

International Nuclear Information System (INIS)

Marsilius, Mie; Granzow, Torsten; Jones, Jacob L

2011-01-01

The superior piezoelectric properties of all polycrystalline ferroelectrics are based on the extent of non-180 0 domain wall motion under electrical and mechanical poling loads. To distinguish between 180 0 and non-180 0 domain wall motion in a soft-doped and a hard-doped lead zirconate titanate (PZT) ceramic, domain texture measurements were performed using x-ray and neutron diffraction after different loading procedures. Comparing the results to measurements of the remanent strain and piezoelectric coefficient allowed the differentiation between different microstructural contributions to the macroscopic parameters. Both types of ceramic showed similar behavior under electric field, but the hard-doped material was more susceptible to mechanical load. A considerable fraction of the piezoelectric coefficient originated from poling by the preferred orientation of 180 0 domains.

Effect of electrical and mechanical poling history on domain orientation and piezoelectric properties of soft and hard PZT ceramics

Science.gov (United States)

Marsilius, Mie; Granzow, Torsten; Jones, Jacob L.

2011-02-01

The superior piezoelectric properties of all polycrystalline ferroelectrics are based on the extent of non-180° domain wall motion under electrical and mechanical poling loads. To distinguish between 180° and non-180° domain wall motion in a soft-doped and a hard-doped lead zirconate titanate (PZT) ceramic, domain texture measurements were performed using x-ray and neutron diffraction after different loading procedures. Comparing the results to measurements of the remanent strain and piezoelectric coefficient allowed the differentiation between different microstructural contributions to the macroscopic parameters. Both types of ceramic showed similar behavior under electric field, but the hard-doped material was more susceptible to mechanical load. A considerable fraction of the piezoelectric coefficient originated from poling by the preferred orientation of 180° domains.

Fatigue-free PZT-based nanocomposites

Energy Technology Data Exchange (ETDEWEB)

Hwang, H J; Sando, M [Nat. Ind. Res. Inst., Nagoya (Japan); Tajima, K [Synergy Ceramics Lab., Fine Ceramics Research Association, Nagoya (Japan); Niihara, K [ISIR, Osaka Univ., Mihogaoka, Ibaraki (Japan)

1999-03-01

The goal of this study is to fabricate fatigue-free piezoelectrics-based nanocomposites. Lead zirconate titanate (PZT) and metallic platinum (Pt) were selected as a matrix and secondary phase dispersoid. Fine Pt particles were homogeneously dispersed in the PZT matrix. Fatigue properties of the unpoled PZT-based nanocomposite under electrical cyclic loading were investigated. The electrical-field-induced crack growth was monitored by an optical microscope, and it depended on the number of cycles the sample was subjected to. Resistance to fatigue was significantly enhanced in the nanocomposite. The excellent fatigue behavior of the PZT/Pt nanocomposites may result from the grain boundary strenghtening due to the interaction between the matrix and Pt particles. (orig.) 8 refs.

Reliability of vibration energy harvesters of metal-based PZT thin films

Science.gov (United States)

Tsujiura, Y.; Suwa, E.; Kurokawa, F.; Hida, H.; Kanno, I.

2014-11-01

This paper describes the reliability of piezoelectric vibration energy harvesters (PVEHs) of Pb(Zr,Ti)O3 (PZT) thin films on metal foil cantilevers. The PZT thin films were directly deposited onto the Pt-coated stainless-steel (SS430) cantilevers by rf-magnetron sputtering, and we observed their aging behavior of power generation characteristics under the resonance vibration condition for three days. During the aging measurement, there was neither fatigue failure nor degradation of dielectric properties in our PVEHs (length: 13 mm, width: 5.0 mm, thickness: 104 μm) even under a large excitation acceleration of 25 m/s2. However, we observed clear degradation of the generated electric voltage depending on excitation acceleration. The decay rate of the output voltage was 5% from the start of the measurement at 25 m/s2. The transverse piezoelectric coefficient (e31,f) also degraded with almost the same decay rate as that of the output voltage; this indicates that the degradation of output voltage was mainly caused by that of piezoelectric properties. From the decay curves, the output powers are estimated to degrade 7% at 15 m/s2 and 36% at 25 m/s2 if we continue to excite the PVEHs for 30 years.

Reliability of vibration energy harvesters of metal-based PZT thin films

International Nuclear Information System (INIS)

Tsujiura, Y; Suwa, E; Kurokawa, F; Hida, H; Kanno, I

2014-01-01

This paper describes the reliability of piezoelectric vibration energy harvesters (PVEHs) of Pb(Zr,Ti)O 3 (PZT) thin films on metal foil cantilevers. The PZT thin films were directly deposited onto the Pt-coated stainless-steel (SS430) cantilevers by rf-magnetron sputtering, and we observed their aging behavior of power generation characteristics under the resonance vibration condition for three days. During the aging measurement, there was neither fatigue failure nor degradation of dielectric properties in our PVEHs (length: 13 mm, width: 5.0 mm, thickness: 104 μm) even under a large excitation acceleration of 25 m/s 2 . However, we observed clear degradation of the generated electric voltage depending on excitation acceleration. The decay rate of the output voltage was 5% from the start of the measurement at 25 m/s 2 . The transverse piezoelectric coefficient (e 31,f ) also degraded with almost the same decay rate as that of the output voltage; this indicates that the degradation of output voltage was mainly caused by that of piezoelectric properties. From the decay curves, the output powers are estimated to degrade 7% at 15 m/s 2 and 36% at 25 m/s 2 if we continue to excite the PVEHs for 30 years

A new traveling wave ultrasonic motor using thick ring stator with nested PZT excitation.

Science.gov (United States)

Chen, Weishan; Shi, Shengjun; Liu, Yingxiang; Li, Pei

2010-05-01

To avoid the disadvantages of conventional traveling wave ultrasonic motors--lower efficiency PZT working mode of d(31), fragility of the PZT element under strong excitation, fatigue of the adhesive layer under harsh environmental conditions, and low volume of the PZT material in the stator--a new type of traveling wave ultrasonic motor is presented in this paper. Here we implement the stator by nesting 64 PZT stacks in 64 slots specifically cut in a thick metal ring and 64 block springs nested within another 64 slots to produce preloading on the PZT stacks. In this new design, the d33 mode of the PZT is used to excite the flexural vibrations of the stator, and fragility of the PZT ceramics and fatigue of the adhesive layer are no longer an issue. The working principle, FEM simulation, fabrication, and performance measurements of a prototype motor were demonstrated to validate the proposed ideas. Typical output of the prototype motor is no-load speed of 15 rpm and maximum torque of 7.96 N x m. Further improvement will potentially enhance its features by increasing the accuracy in fabrication and adopting appropriate frictional material into the interface between the stator and the rotor.

Ceramic piezoelectric materials

International Nuclear Information System (INIS)

Kaszuwara, W.

2004-01-01

Ceramic piezoelectric materials conert reversibility electric energy into mechanical energy. In the presence of electric field piezoelectric materials exhibit deformations up to 0.15% (for single crystals up to 1.7%). The deformation energy is in the range of 10 2 - 10 3 J/m 3 and working frequency can reach 10 5 Hz. Ceramic piezoelectric materials find applications in many modern disciplines such as: automatics, micromanipulation, measuring techniques, medical diagnostics and many others. Among the variety of ceramic piezoelectric materials the most important appear to be ferroelectric materials such as lead zirconate titanate so called PZT ceramics. Ceramic piezoelectric materials can be processed by methods widely applied for standard ceramics, i.e. starting from simple precursors e.g. oxides. Application of sol-gel method has also been reported. Substantial drawback for many applications of piezoelectric ceramics is their brittleness, thus much effort is currently being put in the development of piezoelectric composite materials. Other important research directions in the field of ceramic piezoelectric materials composite development of lead free materials, which can exhibit properties similar to the PZT ceramics. Among other directions one has to state processing of single crystals and materials having texture or gradient structure. (author)

Homogeneity analysis of high yield manufacturing process of mems-based pzt thick film vibrational energy harvesters

DEFF Research Database (Denmark)

Lei, Anders; Xu, Ruichao; Pedersen, C.M.

2011-01-01

This work presents a high yield wafer scale fabrication of MEMS-based unimorph silicon/PZT thick film vibrational energy harvesters aimed towards vibration sources with peak frequencies in the range of a few hundred Hz. By combining KOH etching with mechanical front side protection, SOI wafer...... to accurately define the thickness of the silicon part of the harvester and a silicon compatible PZT thick film screen-printing technique, we are able to fabricate energy harvesters on wafer scale with a yield higher than 90%. The characterization of the fabricated harvesters is focused towards the full wafer....../mass-production aspect; hence the analysis of uniformity in harvested power and resonant frequency....

Effect of solid content variations on PZT slip for tape casting

Directory of Open Access Journals (Sweden)

Gang Jian

2012-12-01

Full Text Available Lead zirconate titanate (PZT particles with pure tetragonal structure were synthesized by solid-state reaction method and used for preparation of slurries with different solid contents (34–80 wt.%. Then, PZT thick films were fabricated by the nonaqueous tape casting method. It was shown that the slurry prepared from ball-milled particles exhibited better rheology properties than slurry from particles which were not ball-milled. Measurement of sedimentation volumes and zeta potentials indicated particle aggregation, resulting in weak stability of the slurries with high solid contents. The microstructure, piezoelectric and ferroelectric properties of PZT sintered films were investigated in terms of solid contents. Ceramic films prepared from the slurry with solid contents of 73 wt.% had the optimal structure and properties. After poling at 200 °C with an applied field of 1.2 kV/cm, a d33 of 294 pC/N was achieved; typical ferroelectric properties were also observed with a Ps of 38 μC/cm2.

Effect of Polymer Matrix on the Structure and Electric Properties of Piezoelectric Lead Zirconatetitanate/Polymer Composites

Directory of Open Access Journals (Sweden)

Rui Li

2017-08-01

Full Text Available Piezoelectric lead zirconatetitanate (PZT/polymer composites were prepared by two typical polymer matrixes using the hot-press method. The micromorphology, microstructure, dielectric properties, and piezoelectric properties of the PZT/polymer composites were characterized and investigated. The results showed that when the condition of frequency is 103 Hz, the dielectric and piezoelectric properties of PZT/poly(vinylidene fluoride were both better than that of PZT/polyvinyl chloride (PVC. When the volume fraction of PZT was 50%, PZT/PVDF prepared by the hot-press method had better comprehensive electric property.

Piezoelectric Flexible LCP-PZT Composites for Sensor Applications at Elevated Temperatures

Science.gov (United States)

Tolvanen, Jarkko; Hannu, Jari; Juuti, Jari; Jantunen, Heli

2018-03-01

In this paper fabrication of piezoelectric ceramic-polymer composites is demonstrated via filament extrusion enabling cost-efficient large-scale production of highly bendable pressure sensors feasible for elevated temperatures. These composites are fabricated by utilizing environmentally resistant and stable liquid crystal polymer matrix with addition of lead zirconate titanate at loading levels of 30 vol%. These composites, of approximately 0.99 mm thick and length of > 50 cm, achieved excellent bendability with minimum bending radius of 6.6 cm. The maximum piezoelectric coefficients d33 and g33 of the composites were > 14 pC/N and > 108 mVm/N at pressure < 10 kPa. In all cases, the piezoelectric charge coefficient (d33) of the composites decreased as a function of pressure. Also, piezoelectric coefficient (d33) further decreased in the case of increased frequency press-release cycle sand pre-stress levels by approximately 37-50%. However, the obtained results provide tools for fabricating novel piezoelectric sensors in highly efficient way for environments with elevated temperatures.

Analytical Model of a PZT Thick-Film Triaxial Accelerometer for Optimum Design

DEFF Research Database (Denmark)

Hindrichsen, Christian Carstensen; Almind, Ninia Sejersen; Brodersen, S. H.

2009-01-01

We present a mechanical model of a triaxial micro accelerometer design using PZT thick-film as the sensing material. The model is based on the full anisotropic material tensors and Eulers' beam equation using simplifying assumptions where the smaller stress contributions are ignored. The model...

Extrusion and properties of lead zirconate titanate piezoelectric ceramics

DEFF Research Database (Denmark)

Cai, S.; Millar, C.E.; Pedersen, L.

1997-01-01

The purpose of this work was to develop a procedure for fabricating electroceramic actuators with good piezoelectric properties. The preparation of lead zirconate titanate (PZT) piezoelectric ceramic rods and tubes by extrusion processing is described. The microstructure of extrudates was investi......The purpose of this work was to develop a procedure for fabricating electroceramic actuators with good piezoelectric properties. The preparation of lead zirconate titanate (PZT) piezoelectric ceramic rods and tubes by extrusion processing is described. The microstructure of extrudates...

Enhanced Output Power of PZT Nanogenerator by Controlling Surface Morphology of Electrode.

Science.gov (United States)

Jung, Woo-Suk; Lee, Won-Hee; Ju, Byeong-Kwon; Yoon, Seok-Jin; Kang, Chong-Yun

2015-11-01

Piezoelectric power generation using Pb(Zr,Ti)O3(PZT) nanowires grown on Nb-doped SrTiO3(nb:STO) substrate has been demonstrated. The epitaxial PZT nanowires prepared by a hydrothermal method, with a diameter and length of approximately 300 nm and 7 μm, respecively, were vertically aligned on the substrate. An embossed Au top electrode was applied to maximize the effective power generation area for non-uniform PZT nanowires. The PZT nanogenerator produced output power density of 0.56 μW/cm2 with a voltage of 0.9 V and current of 75 nA. This research suggests that the morphology control of top electrode can be useful to improve the efficiency of piezoelectric power generation.

UV laser micromachining of piezoelectric ceramic using a pulsed Nd:YAG laser

International Nuclear Information System (INIS)

Zeng, D.W.; Xie, C.S.; Li, K.; Chan, H.L.W.; Choy, C.L.; Yung, K.C.

2004-01-01

UV laser (λ=355 nm) ablation of piezoelectric lead zirconate titanate (PZT) ceramics in air has been investigated under different laser parameters. It has been found that there is a critical pulse number (N=750). When the pulse number is smaller than the critical value, the ablation rate decreases with increasing pulse number. Beyond the critical value, the ablation rate becomes constant. The ablation rate and concentrations of O, Zr and Ti on the ablated surface increase with the laser fluence, while the Pb concentration decreases due to the selective evaporation of PbO. The loss of the Pb results in the formation of a metastable pyrochlore phase. ZrO 2 was detected by XPS in the ablated zone. Also, the concentrations of the pyrochlore phase and ZrO 2 increase with increasing laser fluence. These results clearly indicate that the chemical composition and phase structure in the ablated zone strongly depend on the laser fluence. The piezoelectric properties of the cut PZT ceramic samples completely disappear due to the loss of the Pb and the existence of the pyrochlore phase. After these samples were annealed at 1150 C for 1 h in a PbO-controlled atmosphere, their phase structure and piezoelectric properties were recovered again. Finally, 1-3 and concentric-ring 2-2 PZT/epoxy composites were fabricated by UV laser micromachining and their thickness modes were measured by impedance spectrum analysis and a d 33 meter. Both composites show high piezoelectric properties. (orig.)

Pulsed laser deposition of piezoelectric lead zirconate titanate thin films maintaining a post-CMOS compatible thermal budget

Science.gov (United States)

Schatz, A.; Pantel, D.; Hanemann, T.

2017-09-01

Integration of lead zirconate titanate (Pb[Zrx,Ti1-x]O3 - PZT) thin films on complementary metal-oxide semiconductor substrates (CMOS) is difficult due to the usually high crystallization temperature of the piezoelectric perovskite PZT phase, which harms the CMOS circuits. In this work, a wafer-scale pulsed laser deposition tool was used to grow 1 μm thick PZT thin films on 150 mm diameter silicon wafers. Three different routes towards a post-CMOS compatible deposition process were investigated, maintaining a post-CMOS compatible thermal budget limit of 445 °C for 1 h (or 420 °C for 6 h). By crystallizing the perovskite LaNiO3 seed layer at 445 °C, the PZT deposition temperature can be lowered to below 400 °C, yielding a transverse piezoelectric coefficient e31,f of -9.3 C/m2. With the same procedure, applying a slightly higher PZT deposition temperature of 420 °C, an e31,f of -10.3 C/m2 can be reached. The low leakage current density of below 3 × 10-6 A/cm2 at 200 kV/cm allows for application of the post-CMOS compatible PZT thin films in low power micro-electro-mechanical-systems actuators.

Adjustability of resonance frequency by external magnetic field and bias electric field of sandwich magnetoelectric PZT/NFO/PZT composites

Energy Technology Data Exchange (ETDEWEB)

Xu, Ling-Fang; Feng, Xing; Sun, Kang; Liang, Ze-Yu; Xu, Qian; Liang, Jia-Yu; Yang, Chang-Ping [Hubei University, Hubei Key Laboratory of Ferro and Piezoelectric Materials and Devices, Faculty of Physics and Electronic Science, Hubei Collaborative Innovation Center for Advanced Organic Chemical Materials, Wuhan (China)

2017-07-15

Sandwich magnetoelectric composites of PZT/NFO/PZT (PNP) have been prepared by laminating PZT5, NiFe{sub 2}O{sub 4}, and PZT5 ceramics in turn with polyvinyl alcohol (PVA) paste. A systematic study of structural, magnetic and ferroelectric properties is undertaken. Structural studies carried out by X-ray diffraction indicate formation of cubic perovskite phase of PZT5 ceramic and cubic spinel phase of NiFe{sub 2}O{sub 4} ceramic. As increasing the content of PZT5 phase, ferroelectric loops and magnetic loops of PNP composites showed increasing remnant electric polarizations and decreasing remnant magnetic moments separately. Both external magnetic fields and bias voltages could regulate the basal radial resonance frequency of the composites, which should be originated with the transformation and coupling of the stress between the piezoelectric phase and magnetostrictive phase. Such magnetoelectric composite provides great opportunities for electrostatically tunable devices. (orig.)

Conventional and two step sintering of PZT-PCN ceramics

Science.gov (United States)

Keshavarzi, Mostafa; Rahmani, Hooman; Nemati, Ali; Hashemi, Mahdieh

2018-02-01

In this study, PZT-PCN ceramic was made via sol-gel seeding method and effects of conventional sintering (CS) as well as two-step sintering (TSS) were investigated on microstructure, phase formation, density, dielectric and piezoelectric properties. First, high quality powder was achieved by seeding method in which the mixture of Co3O4 and Nb2O5 powder was added to the prepared PZT sol to form PZT-PCN gel. After drying and calcination, pyrochlore free PZT-PCN powder was synthesized. Second, CS and TSS were applied to achieve dense ceramic. The optimum temperature used for 2 h of conventional sintering was obtained at 1150 °C; finally, undesired ZrO2 phase formed in CS procedure was removed successfully with TSS procedure and dielectric and piezoelectric properties were improved compared to the CS procedure. The best electrical properties obtained for the sample sintered by TSS in the initial temperature of T 1 = 1200 °C and secondary temperature of T 2 = 1000 °C for 12 h.

Sputtered highly oriented PZT thin films for MEMS applications

Science.gov (United States)

Kalpat, Sriram S.

Recently there has been an explosion of interest in the field of micro-electro-mechanical systems (MEMS). MEMS device technology has become critical in the growth of various fields like medical, automotive, chemical, and space technology. Among the many applications of ferroelectric thin films in MEMS devices, microfluidics is a field that has drawn considerable amount of research from bio-technology industries as well as chemical and semiconductor manufacturing industries. PZT thin films have been identified as best suited materials for micro-actuators and micro-sensors used in MEMS devices. A promising application for piezoelectric thin film based MEMS devices is disposable drug delivery systems that are capable of sensing biological parameters, mixing and delivering minute and precise amounts of drugs using micro-pumps or micro mixers. These devices call for low driving voltages, so that they can be battery operated. Improving the performance of the actuator material is critical in achieving battery operated disposal drug delivery systems. The device geometry and power consumption in MEMS devices largely depends upon the piezoelectric constant of the films, since they are most commonly used to convert electrical energy into a mechanical response of a membrane or cantilever and vice versa. Phenomenological calculation on the crystal orientation dependence of piezoelectric coefficients for PZT single crystal have reported a significant enhancement of the piezoelectric d33 constant by more than 3 times along [001] in the rhombohedral phase as compared to the conventionally used orientation PZT(111) since [111] is the along the spontaneous polarization direction. This could mean considerable improvement in the MEMS device performance and help drive the operating voltages lower. The motivation of this study is to investigate the crystal orientation dependence of both dielectric and piezoelectric coefficients of PZT thin films in order to select the appropriate

Development of PZT Actuated Valveless Micropump

Directory of Open Access Journals (Sweden)

Fathima Rehana Munas

2018-04-01

Full Text Available A piezoelectrically actuated valveless micropump has been designed and developed. The principle components of this system are piezoelectrically actuated (PZT metal diaphragms and a complete fluid flow system. The design of this pump mainly focuses on a cross junction, which is generated by a nozzle jet attached to a pump chamber and the intersection of two inlet channels and an outlet channel respectively. During each PZT diaphragm vibration cycle, the junction connecting the inlet and outlet channels with the nozzle jet permits consistencies in fluidic momentum and resistances in order to facilitate complete fluidic path throughout the system, in the absence of any physical valves. The entire micropump structure is fabricated as a plate-by-plate element of polymethyl methacrylate (PMMA sheets and sandwiched to get required fluidic network as well as the overall device. In order to identify the flow characteristics, and to validate the test results with numerical simulation data, FEM analysis using ANSYS was carried out and an eigenfrequency analysis was performed to the PZT diaphragm using COMSOL Multiphysics. In addition, the control system of the pump was designed and developed to change the applied frequency to the piezoelectric diaphragms. The experimental data revealed that the maximum flow rate is 31.15 mL/min at a frequency of 100 Hz. Our proposed design is not only for a specific application but also useful in a wide range of biomedical applications.

Development of PZT Actuated Valveless Micropump.

Science.gov (United States)

Munas, Fathima Rehana; Melroy, Gehan; Abeynayake, Chamitha Bhagya; Chathuranga, Hiniduma Liyanage; Amarasinghe, Ranjith; Kumarage, Pubudu; Dau, Van Thanh; Dao, Dzung Viet

2018-04-24

A piezoelectrically actuated valveless micropump has been designed and developed. The principle components of this system are piezoelectrically actuated (PZT) metal diaphragms and a complete fluid flow system. The design of this pump mainly focuses on a cross junction, which is generated by a nozzle jet attached to a pump chamber and the intersection of two inlet channels and an outlet channel respectively. During each PZT diaphragm vibration cycle, the junction connecting the inlet and outlet channels with the nozzle jet permits consistencies in fluidic momentum and resistances in order to facilitate complete fluidic path throughout the system, in the absence of any physical valves. The entire micropump structure is fabricated as a plate-by-plate element of polymethyl methacrylate (PMMA) sheets and sandwiched to get required fluidic network as well as the overall device. In order to identify the flow characteristics, and to validate the test results with numerical simulation data, FEM analysis using ANSYS was carried out and an eigenfrequency analysis was performed to the PZT diaphragm using COMSOL Multiphysics. In addition, the control system of the pump was designed and developed to change the applied frequency to the piezoelectric diaphragms. The experimental data revealed that the maximum flow rate is 31.15 mL/min at a frequency of 100 Hz. Our proposed design is not only for a specific application but also useful in a wide range of biomedical applications.

Misfit strain-film thickness phase diagrams and related electromechanical properties of epitaxial ultra-thin lead zirconate titanate films

Energy Technology Data Exchange (ETDEWEB)

Qiu, Q.Y.; Mahjoub, R. [School of Materials Science and Engineering, University of New South Wales, Sydney, NSW 2052 (Australia); Alpay, S.P. [Materials Science and Engineering Program and Institute of Materials Science, University of Connecticut, Storrs, CT 06269 (United States); Nagarajan, V., E-mail: nagarajan@unsw.edu.au [School of Materials Science and Engineering, University of New South Wales, Sydney, NSW 2052 (Australia)

2010-02-15

The phase stability of ultra-thin (0 0 1) oriented ferroelectric PbZr{sub 1-x}Ti{sub x}O{sub 3} (PZT) epitaxial thin films as a function of the film composition, film thickness, and the misfit strain is analyzed using a non-linear Landau-Ginzburg-Devonshire thermodynamic model taking into account the electrical and mechanical boundary conditions. The theoretical formalism incorporates the role of the depolarization field as well as the possibility of the relaxation of in-plane strains via the formation of microstructural features such as misfit dislocations at the growth temperature and ferroelastic polydomain patterns below the paraelectric-ferroelectric phase transformation temperature. Film thickness-misfit strain phase diagrams are developed for PZT films with four different compositions (x = 1, 0.9, 0.8 and 0.7) as a function of the film thickness. The results show that the so-called rotational r-phase appears in a very narrow range of misfit strain and thickness of the film. Furthermore, the in-plane and out-of-plane dielectric permittivities {epsilon}{sub 11} and {epsilon}{sub 33}, as well as the out-of-plane piezoelectric coefficients d{sub 33} for the PZT thin films, are computed as a function of misfit strain, taking into account substrate-induced clamping. The model reveals that previously predicted ultrahigh piezoelectric coefficients due to misfit-strain-induced phase transitions are practically achievable only in an extremely narrow range of film thickness, composition and misfit strain parameter space. We also show that the dielectric and piezoelectric properties of epitaxial ferroelectric films can be tailored through strain engineering and microstructural optimization.

Thickness dependence of the poling and current-voltage characteristics of paint films made up of lead zirconate titanate ceramic powder and epoxy resin

Science.gov (United States)

Egusa, Shigenori; Iwasawa, Naozumi

1995-11-01

A specially prepared paint made up of lead zirconate titanate (PZT) ceramic powder and epoxy resin was coated on an aluminum plate and was cured at room temperature, thus forming the paint film of 25-300 μm thickness with a PZT volume fraction of 53%. The paint film was then poled at room temperature, and the poling behavior was determined by measuring the piezoelectric activity as a function of poling field. The poling behavior shows that the piezoelectric activity obtained at a given poling field increases with an increase in the film thickness from 25 to 300 μm. The current-voltage characteristic of the paint film, on the other hand, shows that the increase in the film thickness leads not only to an increase in the magnitude of the current density at a given electric field but also to an increase in the critical electric field at which the transition from the ohmic to space-charge-limited conduction takes place. This fact indicates that the amount of the space charge of electrons injected into the paint film decreases as the film thickness increases. Furthermore, comparison of the current-voltage characteristic of the paint film with that of a pure epoxy film reveals that the space charge is accumulated largely at the interface between the PZT and epoxy phases in the paint film. On the basis of this finding, a model is developed for the poling behavior of the paint film by taking into account a possible effect of the space-charge accumulation and a broad distribution of the electric field in the PZT phase. This model is shown to give an excellent fit to the experimental data of the piezoelectric activity obtained here as a function of poling field and film thickness.

Piezoelectric coefficients of multilayer Pb(Zr,Ti)O{sub 3} thin films

Energy Technology Data Exchange (ETDEWEB)

Muensit, S. [Prince of Songkla University, Department of Physics, Songkhla (Thailand); NANOTEC Center of Excellence at Prince of Songkhla University, Songkhla (Thailand); Sukwisut, P.; Khaenamkeaw, P. [Prince of Songkla University, Department of Physics, Songkhla (Thailand); Lang, S.B. [Ben-Gurion University of the Negev, Department of Chemical Engineering, Beer Sheva (Israel)

2008-08-15

Sol-gel techniques were used to prepare thin films of Pb(Zr{sub x},Ti{sub 1-x})O{sub 3} (PZT) with three different Zr/Ti ratios and a graded PZT film with three different compositional layers. A Michelson interferometer was used to measure the thickness strains due to an applied ac electric field. Effective d{sub 33} piezoelectric strain coefficients were computed from the experimental data. Interfacial pinning caused these coefficients to differ from the true ones. They were corrected for the pinning using both an analytical model and finite-element analysis. The corrected coefficients of the PZT(52/48) sample were in excellent agreement with values of bulk materials. The coefficients of the multilayer sample were very low, probably due to insufficient poling or domain switching. (orig.)

Analysis of signals propagating in a phononic crystal PZT layer deposited on a silicon substrate.

Science.gov (United States)

Hladky-Hennion, Anne-Christine; Vasseur, Jérôme; Dubus, Bertrand; Morvan, Bruno; Wilkie-Chancellier, Nicolas; Martinez, Loïc

2013-12-01

The design of a stop-band filter constituted by a periodically patterned lead zirconate titanate (PZT) layer, polarized along its thickness, deposited on a silicon substrate and sandwiched between interdigitated electrodes for emission/reception of guided elastic waves, is investigated. The filter characteristics are theoretically evaluated by using finite element simulations: dispersion curves of a patterned PZT layer with a specific pattern geometry deposited on a silicon substrate present an absolute stop band. The whole structure is modeled with realistic conditions, including appropriate interdigitated electrodes to propagate a guided mode in the piezoelectric layer. A robust method for signal analysis based on the Gabor transform is applied to treat transmitted signals; extract attenuation, group delays, and wave number variations versus frequency; and identify stop-band filter characteristics.

Using microwave for processing nanostructured PZT ceramics; Utilizacao de microondas no processamento de ceramicas nanoestruturadas de PZT

Energy Technology Data Exchange (ETDEWEB)

Lanza, A.C.; Berti, T.G.; Thomazini, D.; Gelfuso, M.V., E-mail: lanza.work@gmail.com [Universidade Federal de Itajuba (UNIFEI), MG (Brazil). Instituto de Engenharia Mecanica; Eiras, J.A. [Universidade Federal de Sao Carlos (UFSCar), SP (Brazil). Dept. de Fisica

2012-07-01

The PZT ceramics have dielectric and piezoelectric properties of technological interest. The method of microwave assisted hydrothermal synthesis becomes interesting since it occurs in a closed environment, the low temperature and time, compared to conventional methods. In this work, PZT powders were dissolved in acid medium, and by adjusting the pH of the solutions obtained were precipitated, subjected to hydrothermal treatment at 120 °C for intervals of 15, 30 and 60 min. The powders were characterized by differential thermal and gravimetric analysis, X-ray diffraction and scanning electron microscopy. The results confirm the formation of PZT phase in one hour with particle size around 55 nm, showing the feasibility of the proposed method. (author)

New technique for fabrication of high frequency piezoelectric Micromachined Ultrasound Transducers

DEFF Research Database (Denmark)

Pedersen, T; Thomsen, Erik Vilain; Zawada, T

2008-01-01

A novel technique for fabrication of linear arrays of high frequency piezoelectric Micromachined Ultrasound Transducers (pMUT) on silicon substrates is presented. Piezoelectric elements are formed by deposition of PZT ((PbZrxTi1-x)O3) into etched features of the silicon substrate such that the de......A novel technique for fabrication of linear arrays of high frequency piezoelectric Micromachined Ultrasound Transducers (pMUT) on silicon substrates is presented. Piezoelectric elements are formed by deposition of PZT ((PbZrxTi1-x)O3) into etched features of the silicon substrate...

Thick Films acoustic sensors devoted to MTR environment measurements. Thick Films acoustic sensors devoted to Material Testing Reactor environment measurements

International Nuclear Information System (INIS)

Very, F.; Rosenkrantz, E.; Combette, P.; Ferrandis, J.Y.; Fourmentel, D.; Destouches, C.; Villard, J.F.

2015-01-01

The development of advanced instrumentation for in-pile experiments in Material Testing Reactor constitutes a main goal for the improvement of the nuclear fuel behavior knowledge. An acoustic method for fission gas release detection was tested with success during a first experiment called REMORA 3 in 2010 and 2011, and the results were used to differentiate helium and fission gas release kinetics under transient operating conditions. This experiment was lead at OSIRIS reactor (CEA Saclay, France). The maximal temperature on the sensor during the irradiation was about 150 deg. C. In this paper we present a thick film transducer produce by screen printing process. The screen printing of piezoelectric offers a wide range of possible applications for the development of acoustic sensors and piezoelectric structure for measurements in high temperature environment. We firstly produced a Lead Zirconate Titanate (PZT) based paste composed of Pz27 powder from Ferroperm, CF7575 glass, and organic solvent ESL 400. Likewise a Bismuth Titanate based paste synthesized in our laboratory was produced. With these inks we produced thick film up to 130 μm by screen printing process. Material properties characterizations of these thick-film resonators are essential for device design and applications. The piezoelectric coefficients d33 and pyro-electric P(T) coefficient are investigated. The highest P(T) and d33 are respectively 80 μC.m -2 .K -1 and 130 μC.N -1 for the PZT transducer -which validates the fabrication process-. In view of the development of this transducer oriented for high temperature and irradiation environment, we investigated the electrical properties of the transducers for different ranges of frequencies and temperature - from 20 Hz up to 40 MHz between 30 and 400 deg. C. We highlight the evolution of the impedance response and piezoelectric parameters of screen printed piezoelectric structures on alumina. Shortly an irradiation will be realized in order to

Thick Films acoustic sensors devoted to MTR environment measurements. Thick Films acoustic sensors devoted to Material Testing Reactor environment measurements

Energy Technology Data Exchange (ETDEWEB)

Very, F.; Rosenkrantz, E.; Combette, P.; Ferrandis, J.Y. [University Montpellier, IES, UMR 5214, F-34000, Montpellier (France); CNRS, IES, UMR 5214, F-34000, Montpellier (France); Fourmentel, D.; Destouches, C.; Villard, J.F. [CEA, DEN, Instrumentation Sensors and Dosimetry Laboratory, Cadarache, F-13108 St Paul lez Durance (France)

2015-07-01

The development of advanced instrumentation for in-pile experiments in Material Testing Reactor constitutes a main goal for the improvement of the nuclear fuel behavior knowledge. An acoustic method for fission gas release detection was tested with success during a first experiment called REMORA 3 in 2010 and 2011, and the results were used to differentiate helium and fission gas release kinetics under transient operating conditions. This experiment was lead at OSIRIS reactor (CEA Saclay, France). The maximal temperature on the sensor during the irradiation was about 150 deg. C. In this paper we present a thick film transducer produce by screen printing process. The screen printing of piezoelectric offers a wide range of possible applications for the development of acoustic sensors and piezoelectric structure for measurements in high temperature environment. We firstly produced a Lead Zirconate Titanate (PZT) based paste composed of Pz27 powder from Ferroperm, CF7575 glass, and organic solvent ESL 400. Likewise a Bismuth Titanate based paste synthesized in our laboratory was produced. With these inks we produced thick film up to 130 μm by screen printing process. Material properties characterizations of these thick-film resonators are essential for device design and applications. The piezoelectric coefficients d33 and pyro-electric P(T) coefficient are investigated. The highest P(T) and d33 are respectively 80 μC.m{sup -2}.K{sup -1} and 130 μC.N{sup -1} for the PZT transducer -which validates the fabrication process-. In view of the development of this transducer oriented for high temperature and irradiation environment, we investigated the electrical properties of the transducers for different ranges of frequencies and temperature - from 20 Hz up to 40 MHz between 30 and 400 deg. C. We highlight the evolution of the impedance response and piezoelectric parameters of screen printed piezoelectric structures on alumina. Shortly an irradiation will be realized in

Fabrication and comparison of PMN-PT single crystal, PZT and PZT-based 1-3 composite ultrasonic transducers for NDE applications.

Science.gov (United States)

Kim, Ki-Bok; Hsu, David K; Ahn, Bongyoung; Kim, Young-Gil; Barnard, Daniel J

2010-08-01

This paper describes fabrication and comparison of PMN-PT single crystal, PZT, and PZT-based 1-3 composite ultrasonic transducers for NDE applications. As a front matching layer between test material (Austenite stainless steel, SUS316) and piezoelectric materials, alumina ceramics was selected. The appropriate acoustic impedance of the backing materials for each transducer was determined based on the results of KLM model simulation. Prototype ultrasonic transducers with the center frequencies of approximately 2.25 and 5MHz for contact measurement were fabricated and compared to each other. The PMN-PT single crystal ultrasonic transducer shows considerably improved performance in sensitivity over the PZT and PZT-based 1-3 composite ultrasonic transducers. Copyright (c) 2010 Elsevier B.V. All rights reserved.

Fabrication and modelling of 3-3 piezoelectric composites

Energy Technology Data Exchange (ETDEWEB)

Perry, Andrew John

2002-07-01

Three-dimensional modelling of a 3-3 piezoelectric structure was carried out using ANSYS finite element modelling software. Hydrophone figures of merit were calculated for structures with increasing amounts of interconnecting porosity. In addition to air being the second phase, polymer fillers were added to the three dimensional model in order to observe the effect of polymer Young's modulus and Poisson's ratio on the piezoelectric response of the composite material. Results show that increasing the porosity has the effect of improving the hydrostatic piezoelectric properties for applications such as low frequency hydrophones. The optimum amount of porosity depends on the figure of merit to be maximised. In order to validate model predictions, porous piezoelectric structures were fabricated by either the BurPS (Burnt out Polymer Spheres) method or polymer foam reticulation. Corresponding measurements of piezoelectric coefficients were carried out on the porous samples. Experimental results confirmed finite element modelling predictions. PZT-porosity composites and PZT-polymer composites were produced exhibiting superior hydrostatic strain constant (d{sub h}), hydrostatic voltage constant (g{sub h}) and hydrostatic figure of merit (d{sub h}g{sub h}) compared to that of dense PZT. (author)

Development of piezoelectric composites for transducers

Science.gov (United States)

Safari, A.

1994-07-01

For the past decade and a half, many different types of piezoelectric ceramic-polymer composites have been developed intended for transducer applications. These diphasic composites are prepared from non-active polymer, such as epoxy, and piezoelectric ceramic, such as PZT, in the form of filler powders, elongated fibers, multilayer and more complex three-dimensional structures. For the last four years, most of the efforts have been given to producing large area and fine scale PZT fiber composites. In this paper, processing of piezoelectric ceramic-polymer composites with various connectivity patterns are reviewed. Development of fine scale piezoelectric composites by lost mold, injection molding and the relic method are described. Research activities of different groups for preparing large area piezocomposites for hydrophone and actuator applications are briefly reviewed. Initial development of electrostrictive ceramics and composites are also

Piezoelectric properties of the new generation active matrix hybrid (micro-nano) composites

Energy Technology Data Exchange (ETDEWEB)

Parali, Levent, E-mail: levent.parali@cbu.edu.tr [Department of Electronics and Automation, Celal Bayar University, Manisa (Turkey); Şabikoğlu, İsrafil [Department of Physics, Celal Bayar University, Manisa (Turkey); Kurbanov, Mirza A. [Institute of Physics, Academy of Sciences of Azerbaijan, Baku (Azerbaijan)

2014-11-01

Highlights: • We prepared hybrid structured piezocomposites. • We examine thermostimulated depolarization of piezocomposites. • We examine frequency characteristic of piezocomposites with SiO{sub 2} and BaTiO{sub 3}. • The piezocomposites can be used in acoustic applications at 5 Hz–40 kHz. - Abstract: A hybrid piezoelectric composite structure is obtained by addition of nano-sized BaTiO{sub 3}, SiO{sub 2} to the micro-sized PZT and polymers composition. Although the PZT material itself has excellent piezoelectric properties, PZT-based composite variety is limited. Piezoelectric properties of PZT materials can be varied with an acceptor or a donor added to the material. In addition, varieties of PZT-based sensors can be increased with doping polymers which have physical-mechanical, electrophysical, thermophysical and photoelectrical properties. The active matrix hybrid structure occurs when bringing together the unique piezoelectric properties of micro-sized PZT with electron trapping properties of nano-sized insulators (BaTiO{sub 3} or SiO{sub 2}), and their piezoelectric, mechanic and electromechanic properties significantly change. In this study, the relationship between the piezoelectric constant and the coupling factor values of microstructure (PZT–PVDF) and the hybrid structure (PZT–PVDF–BaTiO{sub 3}) composite are compared. The d{sub 33} value and the coupling factor of the hybrid structure have shown an average of 54 and 62% increase according to microstructure composite, respectively. In addition, the d{sub 33} value and the coupling factor of the hybrid structure (PZT–HDPE–SiO{sub 2}) have exhibited about 68 and 52% increase according to microstructure composite (PZT–HDPE), respectively.

Ceramics like PZT-PMN

International Nuclear Information System (INIS)

Droescher, R.E.; Sousa, V.C.; Bergman, C.P.

2009-01-01

The goal of this work was to achieve piezoelectric ceramics referring to the system PZT-PMN Pb(Mg 1 / 3 Nb 2 / 3 Zr 0 , 52 Ti 0 , 48 )O 3 . Have been analysed ceramics like 0,65PZT-0,35PMN ((Pb(Mg 0 , 1167 Nb 0 , 2300 Zr 0 , 3380 Ti 0 , 3120 )O 3 ), 0,75PZT-0,25PMN ((Pb(Mg 0 , 083 Nb 0 . 1675 Zr 0 , 3900 Ti 0 , 3600 )O3) and the 0,85PZT-0,15PMN ((Pb(Mg 0,0500 Nb 0 , 1000 Zr 0 , 4420 Ti 0 , 4080 )O 3 ). The influence of the calcination and concentration of PZT on the lattice phases, microstructure and density was evaluated. Then, the method used was the mixed-oxide method, the samples were taken under different temperatures of calcination before the final sinterizing. The DRX and SEM techniques were used to identify the phases formed and analyse the microstructure, respectively. The main result revealed that, the better way is to realize three burns before the final sinterizing at 1200 o C/4 h . Like that, on obtain for sure the average lattice phases, like: perovskite, pyrochlore and PbO and also tend to densify the samples. (author)

Development, Characterization and Piezoelectric Fatigue Behavior of Lead-Free Perovskite Piezoelectric Ceramics

Science.gov (United States)

Patterson, Eric Andrew

Much recent research has focused on the development lead-free perovskite piezoelectrics as environmentally compatible alternatives to lead zirconate titanate (PZT). Two main categories of lead free perovskite piezoelectric ceramic systems were investigated as potential replacements to lead zirconate titanate (PZT) for actuator devices. First, solid solutions based on Li, Ta, and Sb modified (K0.5Na0.5)NbO3 (KNN) lead-free perovskite systems were created using standard solid state methods. Secondly, Bi-based materials a variety of compositions were explored for (1-x)(Bi 0.5Na0.5)TiO3-xBi(Zn0.5Ti0.5)O 3 (BNT-BZT) and Bi(Zn0.5Ti0.5)O3-(Bi 0.5K0.5)TiO3-(Bi0.5Na0.5)TiO 3 (BZT-BKT-BNT). It was shown that when BNT-BKT is combined with increasing concentrations of Bi(Zn1/2i1/2)O3 (BZT), a transition from normal ferroelectric behavior to a material with large electric field induced strains was observed. The higher BZT containing compositions are characterized by large hysteretic strains(> 0.3%) with no negative strains that might indicate domain switching. This work summarizes and analyzes the fatigue behavior of the new generation of Pb-free piezoelectric materials. In piezoelectric materials, fatigue is observed as a degradation in the electromechanical properties under the application of a bipolar or unipolar cyclic electrical load. In Pb-based materials such as lead zirconate titanate (PZT), fatigue has been studied in great depth for both bulk and thin film applications. In PZT, fatigue can result from microcracking or electrode effects (especially in thin films). Ultimately, however, it is electronic and ionic point defects that are the most influential mechanism. Therefore, this work also analyzes the fatigue characteristics of bulk polycrystalline ceramics of the modified-KNN and BNT-BKT-BZT compositions developed. The defect chemistry that underpins the fatigue behavior will be examined and the results will be compared to the existing body of work on PZT. It will

Piezoelectric Sensor to Measure Soft and Hard Stiffness with High Sensitivity for Ultrasonic Transducers

Directory of Open Access Journals (Sweden)

Yan-Rui Li

2015-06-01

Full Text Available During dental sinus lift surgery, it is important to monitor the thickness of the remaining maxilla to avoid perforating the sinus membrane. Therefore, a sensor should be integrated into ultrasonic dental tools to prevent undesirable damage. This paper presents a piezoelectric (PZT sensor installed in an ultrasonic transducer to measure the stiffness of high and low materials. Four design types using three PZT ring materials and a split PZT for actuator and sensor ring materials were studied. Three sensor locations were also examined. The voltage signals of the sensor and the displacement of the actuator were analyzed to distinguish the low and high stiffness. Using sensor type T1 made of the PZT-1 material and the front location A1 provided a high sensitivity of 2.47 Vm/kN. The experimental results demonstrated that our design can measure soft and hard stiffness.

Epitaxial growth of metallic buffer layer structure and c-axis oriented Pb(Mn1/3,Nb2/3)O3-Pb(Zr,Ti)O3 thin film on Si for high performance piezoelectric micromachined ultrasonic transducer

Science.gov (United States)

Thao, Pham Ngoc; Yoshida, Shinya; Tanaka, Shuji

2017-12-01

This paper reports on the development of a metallic buffer layer structure, (100) SrRuO3 (SRO)/(100) Pt/(100) Ir/(100) yttria-stabilized zirconia (YSZ) layers for the epitaxial growth of a c-axis oriented Pb(Mn1/3,Nb2/3)O3-Pb(Zr,Ti)O3 (PMnN-PZT) thin film on a (100) Si wafer for piezoelectric micro-electro mechanical systems (MEMS) application. The stacking layers were epitaxially grown on a Si substrate under the optimal deposition condition. A crack-free PMnN-PZT epitaxial thin films was obtained at a thickness up to at least 1.7 µm, which is enough for MEMS applications. The unimorph MEMS cantilevers based on the PMnN-PZT thin film were fabricated and characterized. As a result, the PMnN-PZT thin film exhibited -10 to -12 C/m2 as a piezoelectric coefficient e 31,f and ˜250 as a dielectric constants ɛr. The resultant FOM for piezoelectric micromachined ultrasonic transducer (pMUT) is higher than those of general PZT and AlN thin films. This structure has a potential to provide high-performance pMUTs.

Evaluation of Intrinsic Shear Piezoelectric Coefficient d15 of c-Axis Oriented Pb(Zr,Ti)O3 Films

Science.gov (United States)

Kanno, Isaku; Akama, Kenji; Wasa, Kiyotaka; Kotera, Hidetoshi

2009-09-01

Piezoelectric shear strain was measured for c-axis oriented epitaxial Pb(Zr,Ti)O3 (PZT) thin films. The PZT films, with a composition near the morphotropic phase boundary (MPB), were epitaxially grown on (001) MgO substrates and then microfabricated into a rectangular shape by wet etching of the films. Lateral electrodes were deposited on both sides of the PZT films, to apply an external electric field perpendicular to the polarization. A sinusoidal input voltage of 100 kHz was applied between the lateral electrodes, and in-plane shear vibration was measured by a laser Doppler vibrometer. In-plane displacement due to shear mode piezoelectric vibration was clearly observed and increased proportionally with the voltage. Finite element method (FEM) analysis was conducted to determine the horizontal electric field in the PZT film, and the piezoelectric coefficient d15 was calculated to be 440×10-12 m/V. The d15 of the PZT film represents the intrinsic shear piezoelectric effect, which is slightly smaller than that of bulk PZT, due to the absence of extrinsic effects such as longitudinal and transverse piezoelectric strain or domain rotation.

Homogeneity Analysis of a MEMS-based PZT Thick Film Vibration Energy Harvester Manufacturing Process

DEFF Research Database (Denmark)

Lei, Anders; Xu, Ruichao; Borregaard, Louise M.

2012-01-01

This paper presents a homogeneity analysis of a high yield wafer scale fabrication of MEMS-based unimorph silicon/PZT thick film vibration energy harvesters aimed towards vibration sources with peak vibrations in the range of around 300Hz. A wafer with a yield of 91% (41/45 devices) has been...

Characterization of Direct Piezoelectric Properties for Vibration Energy Harvesting

Energy Technology Data Exchange (ETDEWEB)

Yoshimura, Takeshi; Miyabuchi, Hiroki; Ashida, Atsushi; Fujimura, Norifumi [Osaka Prefecture University, 1-1 Gakuen-cho, Naka-ku, Sakai, Osaka, 599-8531 (Japan); Murakami, Syuichi, E-mail: tyoshi@pe.osakafu-u.ac.jp [Technology Research Institute of Osaka Prefecture, 2-7-1 Ayumino, Izumi, Osaka, 594-1157 (Japan)

2011-10-29

Direct piezoelectric effect of Pb(Zr,Ti)O{sub 3} (PZT) thin films was investigated to discuss the application of ferroelectric films to vibration energy harvesting. From the model of the piezoelectric vibration energy harvester, it was found that the figure of merit (FOM) is proportional of the square of the effective transverse piezoelectric coefficient e{sub 31,f}. The e{sub 31,f} coefficient of PZT films were measured by substrate bending method. Furthermore, it was found that the e{sub 31,f} coefficient increases with increasing strain, which is favourable for the vibration energy harvesting.

Size-dependent buckling and vibration behaviors of piezoelectric nanostructures due to flexoelectricity

International Nuclear Information System (INIS)

Liang, Xu; Hu, Shuling; Shen, Shengping

2015-01-01

The symmetry breaking of inversion in solid crystals will induce electric polarization in all solid crystals, which is well known as flexoelectricity. At the nanometer scale, due to the large ratio of surface to volume, piezoelectric structures always exhibit distinct mechanical and electrical behaviors compared with their bulk counterparts. In the current work, the effects of surface and flexoelectricity on the buckling and vibration of piezoelectric nanowires is investigated based on a continuum framework and the Euler–Bernoulli beam hypothesis. Analytical solutions of the electric field in the piezoelectric nanobeam subjected to electrical and mechanical loads are obtained with the surface, flexoelectric and nonlocal electric effects. Numeric simulations demonstrate that the Young’s modulus and bending rigidity of PZT and BaTiO 3 (BT) nanowires are enhanced by flexoelectricity. In addition, the critical buckling voltage is calculated with consideration of the effects of surface and flexoelectricity, and it is found that the effects of surface piezoelectricity, flexoelectricity and residual surface stress play significant roles in determining the critical buckling voltage. Results obtained for the first resonance frequency also indicate that the effects of surface and flexoelectricity are more significant at a narrow range of beam thickness. The first resonance frequency of PZT and BT nanowires is also influenced by the residual surface stress and external applied voltage. The current work is expected to provide a fundamental study on the buckling and vibration behaviors of piezoelectric nanobeams, and it might also be helpful in devising piezoelectric nanowire-based nanoelectronics. (paper)

Force-deflection behavior of piezoelectric actuators

Science.gov (United States)

Singh, Ashok K.; Nagpal, Pawan

2001-11-01

In the present endeavour, force - deflection behavior of various piezoelectric actuator configurations has been analyzed for performance comparison. The response of stack actuator has been simulated using MATLAB Simulink, in a stack actuator-pendulum configuration. During simulation, stack actuator has been used in charge control feedback mode, because of the advantage of low hysteresis, and high linearity. The model incorporates three compensation blocks, viz 1) a PID position controller, 2) a PI piezoelectric current controller, and 3) a dynamic force feedback. A typical stack actuator, having 130 layers, 1.20x10-4 m thickness, 3.46x10-5m2 cross sectional area, of PZT-5H type, has been utilized for simulation. The response of the system has been tested by applying a sinusoidal input of frequency 500 Hz, and waveform amplitude of 1x10-3V.

Piezoelectric Resonance Defined High Performance Sensors and Modulators

Science.gov (United States)

2016-05-30

19.00 20.00 30.00 Received Paper 3.00 Juan P. Tamez, Amar Bhalla, Ruyan Guo. Design and Simulation of 100 kHz and 200 kHz Tri-Phasic PZT Piezoelectric...electrooptic coefficient r_51 of tetragonal potassium lithium tantalate niobate K_095Li_005Ta_040Nb_060O_3 single crystal, Optical Materials Express, (11...Experimental Studies on Tri- Phasic PZT Piezoelectric Transducer, Ferroelectrics, (12 2014): 0. doi: 10.1080/00150193.2014.974472 Jun Li, Yang Li

Analysis of an x-ray mirror made from piezoelectric bimorph

Science.gov (United States)

Zhang, Yao; Li, Ming; Tang, Shanzhi; Gao, Junxiang; Zhang, Weiwei; Zhu, Peiping

2017-07-01

Theoretical analysis of the mechanical behavior of an x-ray mirror made from piezoelectric bimorph is presented. A complete two-dimensional relationship between the radius of curvature of the mirror and the applied voltage is derived. The accuracy of this relationship is studied by comparing the figures calculated by the relationship and Finite Element Analysis. The influences of several critical parameters in the relationship on the radius of curvature are analyzed. It is found that piezoelectric coefficient d31 is the main material property parameter that dominates the radius of curvature, and that the optimal thickness of PZT plate corresponding to largest bending range is 2.5 times of that of faceplate. It is demonstrated that the relationship is helpful for us to complete the primary design of the x-ray mirror made from piezoelectric bimorph.

Influence of binding material of PZT coating on microresonator's electrical and mechanical properties

Science.gov (United States)

Janusas, Giedrius; Guobiene, Asta; Palevicius, Arvydas; Brunius, Alfredas; Cekas, Elingas; Baltrusaitis, Valentinas; Sakalys, Rokas

2017-06-01

Microresonators are fundamental components integrated in hosts of MEMS applications: covering the automotive sector, the telecommunication industry, electronic equipment for surface/material characterization and motion sensing, and etc. The aim of this paper is to investigate the mechanical and electrical properties of PZT film fabricated with three binding materials: polyvinyl butyral (PVB), polymethyl methacrylate (PMMA) and polystyrene (PS) and to evaluate applicability in control of microresonators Q factor. Micro particles of PZT powder were mixed with 20% solution of PVB, PMMA and PS in benzyl alcohol. For investigation of mechanical and electrical properties multilayer cantilevers were made. Obtained PZT and polymer paste was screen printed on copper (thickness 40 μm) using polyester monofilament screen meshes (layer thickness 50 μm) and dried for 30 min at 100°C. Electric dipoles of the PZT particles in composite material were aligned using high voltage generator (5 kV) and a custom-made holder. Electric field was held for 30 min. Surfaces of the applied films were investigated by Atomic Force Microscope NanoWizard(R)3 NanoScience. Dynamic and electrical characteristics of the multilayer were investigated using laser triangular displacement sensor LK-G3000. The measured vibration amplitude and generated electrical potential was collected with USB oscilloscope PicoScope 3424. As the results showed, these cantilevers were able to transform mechanical strain energy into electric potential and, v.v. However, roughness of PZT coatings with PMMA and PS were higher, what could be the reason of the worse quality of the top electrode. However, the main advantage of the created composite piezoelectric material is the possibility to apply it on any uniform or non-uniform vibrating surface and to transform low frequency vibrations into electricity.

Piezoelectric Ceramics Characterization

National Research Council Canada - National Science Library

Jordan, T

2001-01-01

... the behavior of a piezoelectric material. We have attempted to cover the most common measurement methods as well as introduce parameters of interest. Excellent sources for more in-depth coverage of specific topics can be found in the bibliography. In most cases, we refer to lead zirconate titanate (PZT) to illustrate some of the concepts since it is the most widely used and studied piezoelectric ceramic to date.

Fabrication and properties of SmFe2-PZT magnetoelectric thin films

KAUST Repository

Giouroudi, Ioanna

2013-05-17

Magnetoelectric (ME) thin film composites are attracting a continually increasing interest due to their unique features and potential applications in multifunctional microdevices and integrated units such as sensors, actuators and energy harvesting modules. By combining piezoelectric and highly magnetostrictive thin films, the potentialities of these materials increase. In this paper we report the fabrication of SmFe2 and PZT thin films and the investigation of their properties. First of all, a ~ 400 nm thin SmFe film was deposited on top of Si/SiO2 substrate by magnetron sputter deposition. Afterwards, a 140 nm Pt bottom electrode was sputtered on top of the SmFe film forming a bottom electrode. Spin coating was employed for the deposition of the 150 nm thin PZT layer. A PZT solution with 10 %Pb excess was utilized for this fabrication step. Finally, circular Pt top electrodes were sputtered as top electrodes. This paper focuses on the microstructure of the individual films characterized by X-Ray diffractometer (XRD) and scanning electron microscopy (SEM). A piezoelectric evaluation system, aixPES, with TF2000E analyzer component was used for the electric hysteresis measurements of PZT thin films and a vibrating sample magnetometer (VSM) was employed for the magnetic characterization of the SmFe. The developed thin films and the fabricated double layer SmFe-PZT exhibit both good ferromagnetic and piezoelectric responses which predict a promising ME composite structure. The quantitative chemical composition of the samples was confirmed by energy dispersive spectroscopy (EDX). © (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.

Fabrication and properties of SmFe2-PZT magnetoelectric thin films

KAUST Repository

Giouroudi, Ioanna; Alnassar, Mohammed; Kosel, Jü rgen

2013-01-01

Magnetoelectric (ME) thin film composites are attracting a continually increasing interest due to their unique features and potential applications in multifunctional microdevices and integrated units such as sensors, actuators and energy harvesting modules. By combining piezoelectric and highly magnetostrictive thin films, the potentialities of these materials increase. In this paper we report the fabrication of SmFe2 and PZT thin films and the investigation of their properties. First of all, a ~ 400 nm thin SmFe film was deposited on top of Si/SiO2 substrate by magnetron sputter deposition. Afterwards, a 140 nm Pt bottom electrode was sputtered on top of the SmFe film forming a bottom electrode. Spin coating was employed for the deposition of the 150 nm thin PZT layer. A PZT solution with 10 %Pb excess was utilized for this fabrication step. Finally, circular Pt top electrodes were sputtered as top electrodes. This paper focuses on the microstructure of the individual films characterized by X-Ray diffractometer (XRD) and scanning electron microscopy (SEM). A piezoelectric evaluation system, aixPES, with TF2000E analyzer component was used for the electric hysteresis measurements of PZT thin films and a vibrating sample magnetometer (VSM) was employed for the magnetic characterization of the SmFe. The developed thin films and the fabricated double layer SmFe-PZT exhibit both good ferromagnetic and piezoelectric responses which predict a promising ME composite structure. The quantitative chemical composition of the samples was confirmed by energy dispersive spectroscopy (EDX). © (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.

Preparation and properties of porous PMN-PZT ceramics doped with strontium

International Nuclear Information System (INIS)

Zeng Tao; Dong Xianlin; Mao Chaoliang; Chen Shutao; Chen Heng

2006-01-01

The piezoelectric and dielectric properties of lead magnesium niobate-lead zirconate titanate (PMN-PZT) ceramics were investigated as a function of density for transducer applications. A decrease in density increased elastic compliance and improved acoustic impedance matching between PMN-PZT ceramics and ambient media. The reduced dielectric constant (ε 33 ) and enhanced hydrostatic figure of merit (d h g h ) of PMN-PZT were observed with decreased density. The results showed the d h g h of PMN-PZT ceramic with density of about 5.4 g/cm 3 reached 4000 x 10 -15 m 2 /N, and the ε 33 was very close to 2000, which demonstrates that porous PMN-PZT ceramic is a promising material for transducer applications. Moreover, the low density PMN-PZT ceramics exhibited lower dielectric loss than high density PMN-PZT ceramics during the temperature from 250 deg. C to 500 deg. C

Piezoelectric and mechanical properties of structured PZT–epoxy composites

NARCIS (Netherlands)

Kunnamkuzhakkal James, N.; Van den Ende, D.; Lafont, U.; Van der Zwaag, S.; Groen, W.A.

2013-01-01

Structured lead zirconium titanate (PZT)–epoxy composites are prepared by dielectrophoresis. The piezoelectric and dielectric properties of the composites as a function of PZT volume fraction are investigated and compared with the corresponding unstructured composites. The effect of poling voltage

Negligible substrate clamping effect on piezoelectric response in (111)-epitaxial tetragonal Pb(Zr, Ti)O3 films

International Nuclear Information System (INIS)

Yamada, Tomoaki; Yasumoto, Jun; Ito, Daisuke; Yoshino, Masahito; Nagasaki, Takanori; Sakata, Osami; Imai, Yasuhiko; Kiguchi, Takanori; Shiraishi, Takahisa; Shimizu, Takao; Funakubo, Hiroshi

2015-01-01

The converse piezoelectric responses of (111)- and (001)-epitaxial tetragonal Pb(Zr 0.35 Ti 0.65 )O 3 [PZT] films were compared to investigate the orientation dependence of the substrate clamping effect. Synchrotron X-ray diffraction (XRD) and piezoelectric force microscopy revealed that the as-grown (111)-PZT film has a polydomain structure with normal twin boundaries that are changed by the poling process to inclined boundaries, as predicted by Romanov et al. [Phys. Status Solidi A 172, 225 (1999)]. Time-resolved synchrotron XRD under bias voltage showed the negligible impact of substrate clamping on the piezoelectric response in the (111)-PZT film, unlike the case for (001)-PZT film. The origin of the negligible clamping effect in the (111)-PZT film is discussed from the viewpoint of the elastic properties and the compensation of lattice distortion between neighboring domains

PVDF-PZT nanocomposite film based self-charging power cell.

Science.gov (United States)

Zhang, Yan; Zhang, Yujing; Xue, Xinyu; Cui, Chunxiao; He, Bin; Nie, Yuxin; Deng, Ping; Lin Wang, Zhong

2014-03-14

A novel PVDF-PZT nanocomposite film has been proposed and used as a piezoseparator in self-charging power cells (SCPCs). The structure, composed of poly(vinylidene fluoride) (PVDF) and lead zirconate titanate (PZT), provides a high piezoelectric output, because PZT in this nanocomposite film can improve the piezopotential compared to the pure PVDF film. The SCPC based on this nanocomposite film can be efficiently charged up by the mechanical deformation in the absence of an external power source. The charge capacity of the PVDF-PZT nanocomposite film based SCPC in 240 s is ∼0.010 μA h, higher than that of a pure PVDF film based SCPC (∼0.004 μA h). This is the first demonstration of using PVDF-PZT nanocomposite film as a piezoseparator for SCPC, and is an important step for the practical applications of SCPC for harvesting and storing mechanical energy.

Design and implementation of a versatile and variable-frequency piezoelectric coefficient measurement system.

Science.gov (United States)

Wu, J S; Huang, Y K; Wu, F L; Lin, D Y

2012-08-01

We present a simple but versatile piezoelectric coefficient measurement system, which can measure the longitudinal and transverse piezoelectric coefficients in the pressing and bending modes, respectively, at different applied forces and a wide range of frequencies. The functionality of this measurement system has been demonstrated on three samples, including a PbZr(0.52)Ti(0.48)O(3) (PZT) piezoelectric ceramic bulk, a ZnO thin film, and a laminated piezoelectric film sensor. The static longitudinal piezoelectric coefficients of the PZT bulk and the ZnO film are estimated to be around 210 and 8.1 pC/N, respectively. The static transverse piezoelectric coefficients of the ZnO film and the piezoelectric film sensor are determined to be, respectively, -0.284 and -0.031 C/m(2).

Piezoelectric MEMS: Ferroelectric thin films for MEMS applications

Science.gov (United States)

Kanno, Isaku

2018-04-01

In recent years, piezoelectric microelectromechanical systems (MEMS) have attracted attention as next-generation functional microdevices. Typical applications of piezoelectric MEMS are micropumps for inkjet heads or micro-gyrosensors, which are composed of piezoelectric Pb(Zr,Ti)O3 (PZT) thin films and have already been commercialized. In addition, piezoelectric vibration energy harvesters (PVEHs), which are regarded as one of the key devices for Internet of Things (IoT)-related technologies, are promising future applications of piezoelectric MEMS. Significant features of piezoelectric MEMS are their simple structure and high energy conversion efficiency between mechanical and electrical domains even on the microscale. The device performance strongly depends on the function of the piezoelectric thin films, especially on their transverse piezoelectric properties, indicating that the deposition of high-quality piezoelectric thin films is a crucial technology for piezoelectric MEMS. On the other hand, although the difficulty in measuring the precise piezoelectric coefficients of thin films is a serious obstacle in the research and development of piezoelectric thin films, a simple unimorph cantilever measurement method has been proposed to obtain precise values of the direct or converse transverse piezoelectric coefficient of thin films, and recently this method has become to be the standardized testing method. In this article, I will introduce fundamental technologies of piezoelectric thin films and related microdevices, especially focusing on the deposition of PZT thin films and evaluation methods for their transverse piezoelectric properties.

Piezoelectric textured ceramics: Effective properties and application to ultrasonic transducers.

Science.gov (United States)

Levassort, Franck; Pham Thi, Mai; Hemery, Henry; Marechal, Pierre; Tran-Huu-Hue, Louis-Pascal; Lethiecq, Marc

2006-12-22

Piezoelectric textured ceramics obtained by homo-template grain growth (HTGG) were recently demonstrated. A simple model with several assumptions has been used to calculate effective parameters of these new materials. Different connectivities have been simulated to show that spatial arrangements between the considered phases have little influence on the effective parameters, even through the 3-0 connectivity delivers the highest electromechanical thickness factor. A transducer based on a textured ceramic sample has been fabricated and characterised to show the efficiency of these piezoelectric materials. Finally, in a single element transducer configuration, simulation shows an improvement of 2 dB sensitivity for a transducer made with textured ceramic in comparison with a similar transducer design based on standard soft PZT (at equivalent bandwidths).

Power harvesting using PZT ceramics embedded in orthopedic implants.

Science.gov (United States)

Chen, Hong; Liu, Ming; Jia, Chen; Wang, Zihua

2009-09-01

Battery lifetime has been the stumbling block for many power-critical or maintenance-free real-time embedded applications, such as wireless sensors and orthopedic implants. Thus a piezoelectric material that could convert human motion into electrical energy provides a very attractive solution for clinical implants. In this work, we analyze the power generation characteristics of stiff lead zirconate titanate (PZT) ceramics and the equivalent circuit through extensive experiments. Our experimental framework allows us to explore many important design considerations of such a PZT-based power generator. Overall we can achieve a PZT element volume of 0.5 x 0.5 x 1.8 cm, which is considerably smaller than the results reported so far. Finally, we outline the application of our PZT elements in a total knee replacement (TKR) implant.

A spherically-shaped PZT thin film ultrasonic transducer with an acoustic impedance gradient matching layer based on a micromachined periodically structured flexible substrate.

Science.gov (United States)

Feng, Guo-Hua; Liu, Wei-Fan

2013-10-09

This paper presents the microfabrication of an acoustic impedance gradient matching layer on a spherically-shaped piezoelectric ultrasonic transducer. The acoustic matching layer can be designed to achieve higher acoustic energy transmission and operating bandwidth. Also included in this paper are a theoretical analysis of the device design and a micromachining technique to produce the novel transducer. Based on a design of a lead titanium zirconium (PZT) micropillar array, the constructed gradient acoustic matching layer has much better acoustic transmission efficiency within a 20-50 MHz operation range compared to a matching layer with a conventional quarter-wavelength thickness Parylene deposition. To construct the transducer, periodic microcavities are built on a flexible copper sheet, and then the sheet forms a designed curvature with a ball shaping. After PZT slurry deposition, the constructed PZT micropillar array is released onto a curved thin PZT layer. Following Parylene conformal coating on the processed PZT micropillars, the PZT micropillars and the surrounding Parylene comprise a matching layer with gradient acoustic impedance. By using the proposed technique, the fabricated transducer achieves a center frequency of 26 MHz and a -6 dB bandwidth of approximately 65%.

Design and characterization of a carbon-nanotube-reinforced adhesive coating for piezoelectric ceramic discs

International Nuclear Information System (INIS)

Lanzara, G; Chang, F-K

2009-01-01

The silver paste electrode of piezoelectric (PZT) ceramic discs has been shown to produce a weak interface bond between a bare PZT and its paste coating under a peeling force. In this work, an investigation was conducted to reinforce the bond with a high density array of oriented carbon nanotube nano-electrodes (CNTs-NEA), between a bare PZT ceramic and a metal substrate. The ensuing design and fabrication of a carbon-nanotube-coated piezoelectric disc (CPZT) is presented along with a study of the bondline integrity of a CPZT mounted on a hosting structure. The CPZT has its electrode silver paste coating replaced with a high density array of CNTs-NEA. Mechanical tests were performed to characterize the shear strength of the bondline between CPZT discs and the substrate. The test results were compared with shear strengths of the bondlines made of pure non-conductive adhesive and adhesive with randomly mixed CNTs. The comparison showed the oriented CNT coating on PZTs could significantly enhance the interfacial shear strength. Through the microscopic examination, it was evident that the ratio between the CNT length (Lc) and the bond thickness (H) significantly influenced the bond strength of CPZT discs. Three major interface microstructure types and their corresponding failure modes for specific Lc/H values were identified. The study also showed that failure did not occur along the interface between the PZT ceramic element and the CNT coating

Piezoelectric transducer array microspeaker

KAUST Repository

Carreno, Armando Arpys Arevalo

2016-12-19

In this paper we present the fabrication and characterization of a piezoelectric micro-speaker. The speaker is an array of micro-machined piezoelectric membranes, fabricated on silicon wafer using advanced micro-machining techniques. Each array contains 2n piezoelectric transducer membranes, where “n” is the bit number. Every element of the array has a circular shape structure. The membrane is made out four layers: 300nm of platinum for the bottom electrode, 250nm or lead zirconate titanate (PZT), a top electrode of 300nm and a structural layer of 50

Very high frequency (beyond 100 MHz) PZT kerfless linear arrays.

Science.gov (United States)

Wu, Da-Wei; Zhou, Qifa; Geng, Xuecang; Liu, Chang-Geng; Djuth, Frank; Shung, K Kirk

2009-10-01

This paper presents the design, fabrication, and measurements of very high frequency kerfless linear arrays prepared from PZT film and PZT bulk material. A 12-microm PZT thick film fabricated from PZT-5H powder/solution composite and a piece of 15-microm PZT-5H sheet were used to fabricate 32-element kerfless high-frequency linear arrays with photolithography. The PZT thick film was prepared by spin-coating of PZT sol-gel composite solution. The thin PZT-5H sheet sample was prepared by lapping a PZT-5H ceramic with a precision lapping machine. The measured results of the 2 arrays were compared. The PZT film array had a center frequency of 120 MHz, a bandwidth of 60% with a parylene matching layer, and an insertion loss of 41 dB. The PZT ceramic sheet array was found to have a center frequency of 128 MHz with a poorer bandwidth (40% with a parylene matching layer) but a better sensitivity (28 dB insertion loss).

Experiments to Demonstrate Piezoelectric and Pyroelectric Effects

Science.gov (United States)

Erhart, Jirí

2013-01-01

Piezoelectric and pyroelectric materials are used in many current applications. The purpose of this paper is to explain the basic properties of pyroelectric and piezoelectric effects and demonstrate them in simple experiments. Pyroelectricity is presented on lead zirconium titanate (PZT) ceramics as an electric charge generated by the temperature…

Impedance adaptation methods of the piezoelectric energy harvesting

Science.gov (United States)

Kim, Hyeoungwoo

In this study, the important issues of energy recovery were addressed and a comprehensive investigation was performed on harvesting electrical power from an ambient mechanical vibration source. Also discussed are the impedance matching methods used to increase the efficiency of energy transfer from the environment to the application. Initially, the mechanical impedance matching method was investigated to increase mechanical energy transferred to the transducer from the environment. This was done by reducing the mechanical impedance such as damping factor and energy reflection ratio. The vibration source and the transducer were modeled by a two-degree-of-freedom dynamic system with mass, spring constant, and damper. The transmissibility employed to show how much mechanical energy that was transferred in this system was affected by the damping ratio and the stiffness of elastic materials. The mechanical impedance of the system was described by electrical system using analogy between the two systems in order to simply the total mechanical impedance. Secondly, the transduction rate of mechanical energy to electrical energy was improved by using a PZT material which has a high figure of merit and a high electromechanical coupling factor for electrical power generation, and a piezoelectric transducer which has a high transduction rate was designed and fabricated. The high g material (g33 = 40 [10-3Vm/N]) was developed to improve the figure of merit of the PZT ceramics. The cymbal composite transducer has been found as a promising structure for piezoelectric energy harvesting under high force at cyclic conditions (10--200 Hz), because it has almost 40 times higher effective strain coefficient than PZT ceramics. The endcap of cymbal also enhances the endurance of the ceramic to sustain ac load along with stress amplification. In addition, a macro fiber composite (MFC) was employed as a strain component because of its flexibility and the high electromechanical coupling

Mechanical and dielectric characterization of lead zirconate titanate(PZT)/polyurethane(PU) thin film composite for energy harvesting

Science.gov (United States)

Aboubakr, S.; Rguiti, M.; Hajjaji, A.; Eddiai, A.; Courtois, C.; d'Astorg, S.

2014-04-01

The Lead Zirconate titanate (PZT) ceramic is known by its piezoelectric feature, but also by its stiffness, the use of a composite based on a polyurethane (PU) matrix charged by a piezoelectric material, enable to generate a large deformation of the material, therefore harvesting more energy. This new material will provide a competitive alternative and low cost manufacturing technology of autonomous systems (smart clothes, car seat, boat sail, flag ...). A thin film of the PZT/PU composite was prepared using up to 80 vol. % of ceramic. Due to the dielectric nature of the PZT, inclusions of this one in a PU matrix raises the permittivity of the composite, on other hand this latter seems to decline at high frequencies.

Vibration piezoelectric energy harvester with multi-beam

Energy Technology Data Exchange (ETDEWEB)

Cui, Yan, E-mail: yanc@dlut.edu.cn; Zhang, Qunying, E-mail: zhangqunying89@126.com; Yao, Minglei, E-mail: yaomingleiok@126.com [Key Laboratory for Precision and Non-traditional Machining Technology of the Ministry of Education, Dalian University of Technology, 116024, Dalian, Liaoning Province (China); Dong, Weijie, E-mail: dongwj@dlut.edu.cn [School of Electronic and Information Engineering, Dalian University of Technology, 116024, Dalian, Liaoning Province (China); Gao, Shiqiao, E-mail: gaoshq@bit.edu.cn [State Key Laboratory of Explosion Science and Technology, Beijing Institute of Technology, 100081, Beijing Province (China)

2015-04-15

This work presents a novel vibration piezoelectric energy harvester, which is a micro piezoelectric cantilever with multi-beam. The characteristics of the PZT (Pb(Zr{sub 0.53}Ti{sub 0.47})O{sub 3}) thin film were measured; XRD (X-ray diffraction) pattern and AFM (Atomic Force Microscope) image of the PZT thin film were measured, and show that the PZT (Pb(Zr{sub 0.53}Ti{sub 0.47})O{sub 3}) thin film is highly (110) crystal oriented; the leakage current is maintained in nA magnitude, the residual polarisation Pr is 37.037 μC/cm{sup 2}, the coercive field voltage Ec is 27.083 kV/cm, and the piezoelectric constant d{sub 33} is 28 pC/N. In order to test the dynamic performance of the energy harvester, a new measuring system was set up. The maximum output voltage of the single beam of the multi-beam can achieve 80.78 mV under an acceleration of 1 g at 260 Hz of frequency; the maximum output voltage of the single beam of the multi-beam is almost 20 mV at 1400 Hz frequency. .

Advances in Lead-Free Piezoelectric Materials for Sensors and Actuators

Directory of Open Access Journals (Sweden)

Jacob L. Jones

2010-03-01

Full Text Available Piezoelectrics have widespread use in today’s sensor and actuator technologies. However, most commercially available piezoelectric materials, e.g., Pb [ZrxTi1-x] O3 (PZT,are comprised of more than 60 weight percent lead (Pb. Dueto its harmful effects, there is a strong impetus to identify new lead-free replacement materials with comparable properties to those of PZT. This review highlights recent developments in several lead-free piezoelectric materials including BaTiO3, Na0.5Bi0.5TiO3, K0.5Bi0.5TiO3, Na0.5K0.5NbO3, and their solid solutions. The factors that contribute to strong piezoelectric behavior are described and a summary of the properties for the various systems is provided.

Theoretical and experimental investigations of thickness- stretch modes in 1-3 piezoelectric composites

International Nuclear Information System (INIS)

Yang, Z T; Zeng, D P; He, M; Wang, H

2015-01-01

Bulk piezoelectric ceramics operating in thickness-stretch (TSt) modes have been widely used in acoustic-related devices. However, the fundamental TSt waves are always coupled with other modes, and the occurrence of these spurious modes in bulk piezoelectric ceramics affects its performance. To suppress the spurious modes, 1-3 piezoelectric composites are promising candidates. However, theoretical modeling of multiphase ceramic composite objects is very complex. In this study, a 1-3 piezoelectric composite sample and a bulk piezoelectric sample are fabricated. The electrical impedance of these two samples are compared. A simple analytical TSt vibration mode from the three dimensional equations of linear piezoelectricity is used to model the performance of 1-3 piezoelectric composites. The theoretical results agree well with the experimental results. (paper)

Figure of merit comparison of PP-based electret and PVDF-based piezoelectric polymer energy harvesters

Science.gov (United States)

Mrlík, M.; Leadenham, S.; AlMaadeed, M. A.; Erturk, A.

2016-04-01

The harvesting of mechanical strain and kinetic energy has received great attention over the past two decades in order to power wireless electronic components such as those used in passive and active monitoring applications. Piezoelectric ceramics, such as PZT (lead zirconate titanate), constitute the most commonly used electromechanical interface in vibration energy harvesters. However, there are applications in which piezoelectric ceramics cannot be used due to their low allowable curvature and brittle nature. Soft polymer PVDF (polyvinylidene fluoride) is arguably the most popular non-ceramic soft piezoelectric energy harvester material for such scenarios. Another type of polymer that has received less attention is PP (polypropylene) for electret-based energy harvesting using the thickness mode (33- mode). This work presents figure of merit comparison of PP versus PVDF for off-resonant energy harvesting in thickness mode operation, revealing substantial advantage of PP over PVDF. For thickness mode energy harvesting scenarios (e.g. dynamic compression) at reasonable ambient vibration frequencies, the figure of merit for the maximum power output is proportional to the square of the effective piezoelectric strain constant divided by the effective permittivity constant. Under optimal conditions and for the same volume, it is shown that PP can generate more than two orders of magnitude larger electrical power as compared to PVDF due to the larger effective piezoelectric strain constant and lower permittivity of the former.

Equivalent circuit and optimum design of a multilayer laminated piezoelectric transformer.

Science.gov (United States)

Dong, Shuxiang; Carazo, Alfredo Vazquez; Park, Seung Ho

2011-12-01

A multilayer laminated piezoelectric Pb(Zr(1-x)Ti(x))O(3) (PZT) ceramic transformer, operating in a half- wavelength longitudinal resonant mode (λ/2 mode), has been analyzed. This piezoelectric transformer is composed of one thickness-polarized section (T-section) for exciting the longitudinal mechanical vibrations, two longitudinally polarized sections (L-section) for generating high-voltage output, and two insulating layers laminated between the T-section and L-section layers to provide insulation between the input and output sections. Based on the piezoelectric constitutive and motion equations, an electro-elasto-electric (EEE) equivalent circuit has been developed, and correspondingly, an effective EEE coupling coefficient was proposed for optimum design of this multilayer transformer. Commercial finite element analysis software is used to determine the validity of the developed equivalent circuit. Finally, a prototype sample was manufactured and experimental data was collected to verify the model's validity.

Negligible substrate clamping effect on piezoelectric response in (111)-epitaxial tetragonal Pb(Zr, Ti)O{sub 3} films

Energy Technology Data Exchange (ETDEWEB)

Yamada, Tomoaki, E-mail: t-yamada@nucl.nagoya-u.ac.jp [Department of Materials, Physics and Energy Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603 (Japan); PRESTO, Japan Science and Technology Agency, 4-1-8 Honcho, Kawaguchi, Saitama 332-0012 (Japan); Yasumoto, Jun; Ito, Daisuke; Yoshino, Masahito; Nagasaki, Takanori [Department of Materials, Physics and Energy Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603 (Japan); Sakata, Osami [Synchrotron X-ray Station at SPring-8 and Synchrotron X-ray Group, National Institute for Materials Science, Sayo-cho, Sayo-gun, Hyogo 679-5148 (Japan); Department of Innovative and Engineered Material, Tokyo Institute of Technology, Yokohama 226-8503 (Japan); Imai, Yasuhiko [Japan Synchrotron Radiation Research Institute, SPring-8, Sayo-cho, Sayo-gun, Hyogo 679-5198 (Japan); Kiguchi, Takanori [Institute for Materials Research, Tohoku University, Sendai, Miyagi 980-8577 (Japan); Shiraishi, Takahisa; Shimizu, Takao; Funakubo, Hiroshi [Department of Innovative and Engineered Material, Tokyo Institute of Technology, Yokohama 226-8503 (Japan)

2015-08-21

The converse piezoelectric responses of (111)- and (001)-epitaxial tetragonal Pb(Zr{sub 0.35}Ti{sub 0.65})O{sub 3} [PZT] films were compared to investigate the orientation dependence of the substrate clamping effect. Synchrotron X-ray diffraction (XRD) and piezoelectric force microscopy revealed that the as-grown (111)-PZT film has a polydomain structure with normal twin boundaries that are changed by the poling process to inclined boundaries, as predicted by Romanov et al. [Phys. Status Solidi A 172, 225 (1999)]. Time-resolved synchrotron XRD under bias voltage showed the negligible impact of substrate clamping on the piezoelectric response in the (111)-PZT film, unlike the case for (001)-PZT film. The origin of the negligible clamping effect in the (111)-PZT film is discussed from the viewpoint of the elastic properties and the compensation of lattice distortion between neighboring domains.

Influence of piezoceramic to fused silica plate thickness on the radii of curvature of piezoelectric bimorph mirror

International Nuclear Information System (INIS)

Libu, M.; Susanth, S.; Vasanthakumari, K. G.; Dileep Kumar, C. J.; Raghu, N.

2012-01-01

Piezoelectric based bimorph mirrors (PBM) find extensive use in focusing of x-ray beams. Many optical instruments require use of PBM whose radii of curvature can be tuned precisely. The 100 mm and 300 mm PBMs were fabricated with varying piezoelectric to fused silica plate thicknesses. The radii of curvature of free standing mirrors were measured as a function of voltage and it was found to decrease with increasing voltage. For a given piezoelectric plate thickness, as the fused silica thickness increases, the radii of curvature was found to increase owing to increase in stiffness of the mirror. On the other hand, for a given fused silica plate thickness, when the piezoelectric plate thickness is increased, the radii of curvature are decreased for a given electric field, due to increase in generated force. This study brings out the influence of piezoceramic to fused silica plate thickness on the radii of curvature of PBM.

PLZT-based photovoltaic Piezoelectric Transformer with light feedback

Energy Technology Data Exchange (ETDEWEB)

Kozielski, L [University of Silesia, Dep. Materials Sc, 2, Sniezna St. Sosnowiec, 41-200 Poland (Poland); Adamczyk, M [University of Silesia, Institute Phys., 4, Uniwersytecka St. Katowice, 40-007 Poland (Poland); Erhart, J, E-mail: lucjan.kozielski@us.edu.pl [Technical University of Liberec, Studencka St. 2, CZ-461 17 Liberec (Czech Republic)

2011-10-29

Piezoelectric Transformer (PT) converts an electrical AC input voltage into ultrasonic vibrations and reconverts back to an output as AC voltage. Hard lead zirconate titanate (PZT) ceramics is typically used for fabrications of such devices. In case of lanthaniun ion La{sup 3+} addition in PZT solid solution we can achieve piezoelectric ceramics with good transparency exhibiting both optical Pockels and Kerr effects. Values of these coefficients in the PLZT system are much bigger than in LiNbO{sub 3} or SBN single crystals. Among the various PLZT compositions 8/65/35, near the morphotropic boundary, exhibit large electrooptic effect and thus have found applications in light shutters and displays. In the present study we have investigated radial mode piezoelectric transformer based on optically transparent PLZT8/65/35 ceramics. The effect of the UV light generated photovoltage and photostriction on the efficiency and voltage step-up ratio of piezoelectric transformer have been demonstrated. Novel functions of this device is proposed by superimposing two sophistically coupled effects of piezoelectricity and photostriction.

Study of pyroelectric activity of PZT/PVDF-HFP composite

Directory of Open Access Journals (Sweden)

Luiz Francisco Malmonge

2003-12-01

Full Text Available Flexible, free-standing piezo and pyroelectric composite with 0 to 3 connectivity was made up from Lead Zirconate Titanate (PZT powder and poly(vinylidene fluoride-hexafluoropropylene (PVDF-HFP copolymer. The pyroelectric and the piezoelectric longitudinal (d33 coefficients were measured. A 50/50 vol.% PZT/PVDF-HFP composite resulted in piezo and pyroelectric coefficients of d33 = 25.0 pC/N and p = 4.5 × 10-4 C/m²K at 70 °C, respectively. Analysis of the complex permittivity in a wide range of frequency was carried out indicating lower permittivity of the composite in comparison with a permittivity of the PZT ceramic. The low value of the permittivity gives a high pyroelectric figure of merit indicating that this material can be used to build a temperature sensor in spite of the lower pyroelectric coefficient compared with PZT.

Highly polarized single-c-domain single-crystal Pb(Mn,Nb)O(3)-PZT thin films.

Science.gov (United States)

Wasa, Kiyotaka; Adachi, Hideaki; Nishida, Ken; Yamamoto, Takashi; Matsushima, Tomoaki; Kanno, Isaku; Kotera, Hidetoshi

2012-01-01

In-plane unstrained single-c-domain/single-crystal thin films of PZT-based ternary ferroelectric perovskite, ξPb(Mn,Nb)O3-(1 - ξ)PZT, were grown on SrRuO(3)/Pt/MgO substrates using magnetron sputtering followed by quenching. The sputtered unstrained thin films exhibit unique ferroelectric properties: high coercive field, Ec > 180 kV/cm, large remanent polarization, P(r) = 100 μC/cm(2), small relative dielectric constants, ε* = 100 to 150, high Curie temperature, Tc = ~600 °C, and bulk-like large transverse piezoelectric constants, e31,f = -12.0 C/m(2) for PZT(48/52) at ξ = 0.06. The unstrained thin films are an ideal structure to extract the bulk ferroelectric properties. Their micro-structures and ferroelectric properties are discussed in relation to the potential applications for piezoelectric MEMS. © 2012 IEEE

Fatigue response of a PZT multilayer actuator under high-field electric cycling with mechanical preload

Science.gov (United States)

Wang, Hong; Wereszczak, Andrew A.; Lin, Hua-Tay

2009-01-01

An electric fatigue test system was developed for evaluating the reliability of piezoelectric actuators with a mechanical loading capability. Fatigue responses of a lead zirconate titanate (PZT) multilayer actuator with a platethrough electrode configuration were studied under an electric field (1.7 times that of the coercive field of PZT material) and a concurrent mechanical preload (30.0 MPa). A total of 109 cycles was carried out. Variations in charge density and mechanical strain under the high electric field and constant mechanical loads were observed during the fatigue test. The dc and the first harmonic (at 10 Hz) dielectric and piezoelectric coefficients were subsequently characterized using fast Fourier transformation. Both the dielectric and the piezoelectric coefficients exhibited a monotonic decrease prior to 2.86×108 cycles under certain preloading conditions, and then fluctuated. Both the dielectric loss tangent and the piezoelectric loss tangent also fluctuated after a decrease. The results are interpreted and discussed with respect to domain wall activities, microdefects, and other anomalies.

Enhanced piezoelectricity in A B O3 ferroelectrics via intrinsic stress-driven flattening of the free-energy profile

Science.gov (United States)

Feng, Yu; Li, Wei-Li; Yu, Yang; Jia, He-Nan; Qiao, Yu-Long; Fei, Wei-Dong

2017-11-01

An approach to greatly enhance the piezoelectric properties (˜4 00 pC/N) of the tetragonal BaTi O3 polycrystal using a small number of A -site acceptor-donor substitutions [D. Xu et al., Acta Mater. 79, 84 (2014), 10.1016/j.actamat.2014.07.023] has been proposed. In this study, Pb (ZrTi ) O3 (PZT) based polycrystals with various crystal symmetries (tetragonal, rhombohedral, and so on) were chosen to investigate the piezoelectricity enhancement mechanism. X-ray diffraction results show that doping generates an intrinsic uniaxial compressive stress along the [001] pc direction in the A B O3 lattices. Piezoelectric maps in the parameter space of temperature and Ti concentration in the PZT and doped system show a more significant enhancement effect of L i+-A l3 + codoping in tetragonal PZT than in the rhombohedral phase. Phenomenological thermodynamic analysis indicates that the compressive stress results in more serious flattening of the free-energy profile in tetragonal PZT, compared with that in the rhombohedral phase. The chemical stress obtained by this acceptor-donor codoping can be utilized to optimize the piezoelectric performance on the tetragonal-phase site of the morphotropic phase boundary in the PZT system. The present study provides a promising route to the large piezoelectric effect induced by chemical-stress-driven flattening of the free-energy profile.

Comparison of PZN-PT, PMN-PT single crystals and PZT ceramic for vibration energy harvesting

International Nuclear Information System (INIS)

Yang, Zhengbao; Zu, Jean

2016-01-01

Highlights: • Systematic analysis of PMN-PT and PZN-PT single crystals for energy harvesters. • Performance analysis and comparison under various conditions. • Discussion of the effect of the SSHI technique on single crystal energy harvesters. • Efficiency analysis in both on-resonance and off-resonance conditions. - Abstract: Vibration energy harvesting has a great potential to achieve self-powered operations for wireless sensors, wearable devices and medical electronics, and thus has attracted much attention in academia and industry. The majority of research into this subject has focused on the piezoelectric effect of synthetic materials, especially the perovskite PZT ceramics. Recently the new-generation piezoelectric materials PMN-PT and PZN-PT single crystals have gained significant interest because of their outstanding piezoelectric properties. They can be used to replace the widely-adopted PZT ceramics for improving energy harvesters’ performance substantially. However, there is little research on comparing PMN-PT and PZN-PT energy harvesters against PZT harvesters. In this paper, we present a systematic comparison between vibration energy harvesters using the PMN-PT, PZN-PT single crystals and those using the PZT ceramics. Key properties of the three materials are summarized and compared. The performance of the PMN-PT and PZN-PT energy harvesters is characterized under different conditions (beam length, resistance, frequency, excitation strength, and backward coupling effect), and is quantitatively compared with the PZT counterpart. Furthermore, the effect of the synchronized switch harvesting on inductor (SSHI) circuit on the three harvesters is discussed. The experimental results indicate that energy harvesters using the PMN-PT and PZN-PT single crystals can significantly outperform those using the PZT ceramics. This study provides a strong base for future research on high-performance energy harvesters using the new PMN-PT and PZN-PT single

Design Considerations for Aural Vital Signs Using PZT Piezoelectric Ceramics Sensor Based on the Computerization Method

Directory of Open Access Journals (Sweden)

Jerapong Tantrakoon

2007-11-01

Full Text Available The purpose was to illustrate how system developed for measurement of the aural vital signs such as patient’s heart and lung sounds in the hospital. For heart sounds measurement must operate the frequency response between 20 – 800 Hz, and lung sounds measurement must operate the frequency response between 160 – 4,000 Hz. The method was designed PZT piezoelectric ceramics for both frequency response in the same PZT sensor. It converts a signal from aural vital sign form to voltage signal. The signal is suitably amplified and re-filtered in band pass frequency band. It is converted to digital signal by an analog to digital conversion circuitry developed for the purpose. The results were that all signals can fed to personal computer through the sound card port. With the supporting software for drawing of graphic on the screen, the signal for a specific duration is accessed and stored in the computer’s memory in term of each patient’s data. In conclusion, the data of each patient call dot pcg (.pcg for drawing graph and dot wave (.wave for sound listening or automatic sending via electronic mail to the physician for later analysis of interpreting the sounds on the basis of their time domain and frequency domain representation to diagnose heart disorders.

Piezoelectric transducer vibrations in a one-dimensional approximation

CERN Document Server

Hilke, H J

1973-01-01

The theory of piezoelectric transducer vibrations, which may be treated as one-dimensional, is developed in detail for thin discs vibrating in a pure thickness extensional mode. An effort has been made to obtain relations of general validity, which include losses, and which are in a simple explicit form convenient for practical calculations. The behaviour of transducers is discussed with special attention to their characteristics at the two fundamental frequencies, the so-called parallel and series resonances. Several peculiarities occur when transducers are coupled to media with considerably different acoustic impedances. These peculiarities are discussed and illustrated by numerical results for quartz and PZT 4 piezoelectric discs radiating into water, air and liquid hydrogen. The application of the theory to different types of vibrations is briefly illustrated for thin bars vibrating longitudinally. Short discussions are included on compound transducer systems, and on the properties of thin discs as receiv...

Bending-induced electromechanical coupling and large piezoelectric response in a micromachined diaphragm

KAUST Repository

Wang, Zhihong

2013-11-04

We investigated the dependence of electromechanical coupling and the piezoelectric response of a micromachined Pb(Zr 0.52 Ti 0.48)O 3 (PZT) diaphragm on its curvature by observing the impedance spectrum and central deflection responses to a small AC voltage. The curvature of the diaphragm was controlled by applying air pressure to its back. We found that a depolarized flat diaphragm does not initially exhibit electromechanical coupling or the piezoelectric response. However, upon the application of static air pressure to the diaphragm, both electromechanical coupling and the piezoelectric response can be induced in the originally depolarized diaphragm. The piezoelectric response increases as the curvature increases and a giant piezoelectric response can be obtained from a bent diaphragm. The obtained results clearly demonstrate that a high strain gradient in a diaphragm can polarize a PZT film through a flexoelectric effect, and that the induced piezoelectric response of the diaphragm can be controlled by adjusting its curvature.

A theory of the inverse magnetoelectric effect in layered magnetostrictive-piezoelectric structures

Science.gov (United States)

Filippov, D. A.; Radchenko, G. S.; Firsova, T. O.; Galkina, T. A.

2017-05-01

A theory of the inverse magnetoelectric effect in layered structures has been presented. The theory is based on solving the equations of elastodynamics and electrostatics separately for the magnetostrictive and piezoelectric phases, taking into account the conditions at the interface between the phases. Expressions for the coefficient of inverse magnetoelectric conversion through the parameters characterizing the magnetostrictive and piezoelectric phases have been obtained. Theoretical dependences of the inverse magnetoelectric conversion coefficient on the frequency of the alternating-current electric field for the three-layer PZT-Ni-PZT structure and the two-layer terfenol- D-PZT structure have been calculated. The results of the calculations are in good agreement with the experimental data.

Estimation of strain from piezoelectric effect and domain switching in morphotropic PZT by combined analysis of macroscopic strain measurements and synchrotron X-ray data

International Nuclear Information System (INIS)

Kungl, Hans; Theissmann, Ralf; Knapp, Michael; Baehtz, Carsten; Fuess, Hartmut; Wagner, Susanne; Fett, Theo; Hoffmann, Michael J.

2007-01-01

Morphotropic PZT ceramics are State of the art materials for ferroelectric actuators. Essential performance parameters for these materials are strain and hysteresis. On a microscopic scale the strain provided by an electric field is due to two different mechanisms. The piezoelectric effect causes an elongation of the unit cells, whereas domain switching changes their crystallographic orientation by aligning the polarization axis towards the field direction. A method is outlined to estimate the contribution of the two mechanisms to total strain by combining macroscopic strain measurements and X-ray diffraction (XRD) data. Results from macroscopic measurements of remanent and unipolar strain with the corresponding data on texture, derived from in situ synchrotron radiation XRD patterns, are analyzed and evaluated by a semi-empirical approach. The method was applied to six morphotropic, LaSr doped PZT materials of different Zr/Ti ratios. Results are discussed with respect to the differences between the materials

Surface effects on the electroelastic responses of a thin piezoelectric plate with nanoscale thickness

International Nuclear Information System (INIS)

Yan Zhi; Jiang Liying

2012-01-01

This work aims to investigate the electroelastic responses of a thin piezoelectric plate under mechanical and electrical loads with the consideration of surface effects. Surface effects, including surface elasticity, residual surface stress and surface piezoelectricity, are incorporated into the conventional Kirchhoff plate theory for a piezoelectric plate via the surface piezoelectricity model and the generalized Young-Laplace equations. Different from the results predicted by the conventional plate theory ignoring the surface effects, the proposed model predicts size-dependent behaviours of the piezoelectric thin plate with nanoscale thickness. It is found that surface effects have significant influence on the electroelastic responses of the piezoelectric nanoplate. This work is expected to provide more accurate predictions on characterizing nanofilm or nanoribbon based piezoelectric devices in nanoelectromechanical systems. (paper)

Micro-fabricated flexible PZT cantilever using d33 mode for energy harvesting

Science.gov (United States)

Cho, Hyunok; Park, Jongcheol; Park, Jae Yeong

2017-12-01

This paper presents a micro-fabricated flexible and curled PZT [Pb(Zr0.52Ti0.48)O3] cantilever using d33 piezoelectric mode for vibration based energy harvesting applications. The proposed cantilever based energy harvester consists of polyimide, PZT thin film, and inter-digitated IrOx electrodes. The flexible cantilever was formed using bulk-micromachining on a silicon wafer to integrate it with ICs. The d33 piezoelectric mode was applied to achieve a large output voltage by using inter-digitated electrodes, and the PZT thin film on polyimide layer has a remnant polarization and coercive filed of approximately 2 P r = 47.9 μC/cm2 and 2 E c = 78.8 kV/cm, respectively. The relative dielectric constant was 900. The fabricated micro-electromechanical systems energy harvester generated output voltages of 1.2 V and output power of 117 nW at its optimal resistive load of 6.6 MΩ from its resonant frequency of 97.8 Hz with an acceleration of 5 m/s2.

Piezoelectric transducer array microspeaker

KAUST Repository

Carreno, Armando Arpys Arevalo; Conchouso Gonzalez, David; Castro, David; Kosel, Jü rgen; Foulds, Ian G.

2016-01-01

contains 2n piezoelectric transducer membranes, where “n” is the bit number. Every element of the array has a circular shape structure. The membrane is made out four layers: 300nm of platinum for the bottom electrode, 250nm or lead zirconate titanate (PZT

Properties of RF-Sputtered PZT Thin Films with Ti/Pt Electrodes

Directory of Open Access Journals (Sweden)

Cui Yan

2014-01-01

Full Text Available Effect of annealing temperature and thin film thickness on properties of Pb(Zr0.53Ti0.47O3 (PZT thin film deposited via radiofrequency magnetron sputtering technique onto Pt/Ti/SiO2/Si substrate was investigated. Average grain sizes of the PZT thin film were measured by atomic force microscope; their preferred orientation was studied through X-ray diffraction analysis. Average residual stress in the thin film was estimated according to the optimized Stoney formula, and impedance spectroscopy characterization was performed via an intelligent LCR measuring instrument. Average grain sizes of PZT thin films were 60 nm~90 nm and their average roughness was less than 2 nm. According to X-ray diffraction analysis, 600°C is the optimal annealing temperature to obtain the PZT thin film with better crystallization. Average residual stress showed that thermal mismatch was the decisive factor of residual stress in Pt/Ti/SiO2/Si substrate; the residual stress in PZT thin film decreased as their thickness increased and increased with annealing temperature. The dielectric constant and loss angle tangent were extremely increased with the thickness of PZT thin films. The capacitance of the device can be adjusted according to the thickness of PZT thin films.

Sensing capabilities of piezoelectric wafer active sensors in extreme nuclear environment

Science.gov (United States)

Faisal Haider, Mohammad; Lin, Bin; Yu, Lingyu; Giurgiutiu, Victor

2017-04-01

There is considerable demand for structural health monitoring (SHM) at locations where there are substantial radiation fields such as nuclear reactor components, dry cask storage canister, irradiated fuel assemblies, etc. Piezoelectric wafer active sensors (PWAS) have been emerged as one of the major SHM sensing technologies. In order to use PWAS to perform SHM in nuclear environment, radiation influence on sensor and sensing capability needs to be investigated to assure the reliability of the PWAS based method. Radiation may cause degradation or even complete failure of sensors. Gamma radiation is one of the major radiation sources near the nuclear source. Therefore, experimental investigation was completed on the gamma radiation endurance of piezoelectric sensors. The irradiation test was done in a Co-60 Gamma Irradiator. Lead Zirconate Titanate (PZT) and Gallium Orthophosphate (GaPO4) PWAS were exposed under gamma radiation at 100 Gy/hr rate for 20 hours. Electro-mechanical (E/M) admittance signatures and electrical capacitance were measured to evaluate the PWAS performance before and after every 4 hours exposure to gamma radiation. PWAS were kept at room temperature for 6 days after each 4 hours radiation exposure to investigate the effect of time on PWAS by gamma radiation. It was found that, PZT-PWAS show variation in resonance frequency for both in plane and thickness mode E/M admittance. Where, the changes in resonance amplitudes are larger for PZT-PWAS. GaPO4-PWAS E/M impedance/admittance spectra don't show any reasonable change after gamma irradiation. A degradation behavior of electrical properties in the PZT-PWAS was observed. Capacitance value of PZT-PWAS decreases from 3.2 nF to 3.07 nF after exposing to gamma radiation for 20 hours at 100Gy/hour. This degradation behavior of electrical properties may be explained by the pinning of domain walls by some radiation induced effect. GaPO4-PWAS doesn't show reasonable degradation in electrical properties

Electromechanical-Traffic Model of Compression-Based Piezoelectric Energy Harvesting

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Kok B.C.

2016-01-01

Full Text Available Piezoelectric energy harvesting has advantages over other alternative sources due to its large power density, ease of applications, and capability to be fabricated at different scales: macro, micro, and nano. This paper presents an electromechanical-traffic model for roadway compression-based piezoelectric energy harvesting system. A two-degree-of-freedom (2-DOF electromechanical model has been developed for the piezoelectric energy harvesting unit to define its performance in power generation under a number of external excitations on road surface. Lead Zirconate Titanate (PZT-5H is selected as the piezoelectric material to be used in this paper due to its high Piezoelectric Charge Constant (d and Piezoelectric Voltage Constant (g values. The main source of vibration energy that has been considered in this paper is the moving vehicle on the road. The effect of various frequencies on possible generated power caused by different vibration characteristics of moving vehicle has been studied. A single unit of circle-shape Piezoelectric Cymbal Transducer (PCT with diameter of 32 mm and thickness of 0.3 mm be able to generate about 0.12 mW and 13 mW of electric power under 4 Hz and 20 Hz of excitation, respectively. The estimated power to be generated for multiple arrays of PCT is approximately 150 kW/ km. Thus, the developed electromechanical-traffic model has enormous potential to be used in estimating the macro scale of roadway power generation system.

Experimental characterization of PZT fibers using IDE electrodes

Science.gov (United States)

Wyckoff, Nicholas; Ben Atitallah, Hassene; Ounaies, Zoubeida

2016-04-01

Lead zirconate titanate (PZT) fibers are mainly used in active fiber composites (AFC) where they are embedded in a polymer matrix. Interdigitated electrodes (IDE) along the direction of the fibers are used to achieve planar actuation, hereby exploiting the d33 coefficient of PZT. When embedded in the AFC, the PZT fibers are subjected to mechanical loading as well as non-uniform electric field as a result of the IDEs. Therefore, it is important to characterize the electrical and electromechanical behavior of these fibers ex-situ using the IDE electrodes to assess the impact of nonuniform electric field on the properties of the fibers. For that reason, this work aims at quantifying the impact of IDE electrodes on the electrical and electromechanical behavior of PZT fibers, which is necessary for their successful implementation in devices like AFC. The tested fibers were purchased from Advanced Cerametrics and they have an average diameter of 250 micrometers. The IDE electrodes were screen printed on an acrylic substrate. The PZT fibers were subjected to frequency sweeps at low voltages to determine permittivity for parallel and interdigitated electrodes. The piezoelectric e33 constant is determined from electromechanical testing of PZT fibers in parallel electrodes to compare the electromechanical behavior for PZT in bulk and fiber form. The dielectric constant and e33 were found to be lower for the IDE and parallel electrodes compared to bulk but comparable to results published in literature.

Wafer-scale integration of piezoelectric actuation capabilities in nanoelectromechanical systems resonators

OpenAIRE

DEZEST, Denis; MATHIEU, Fabrice; MAZENQ, Laurent; SOYER, Caroline; COSTECALDE, Jean; REMIENS, Denis; THOMAS, Olivier; DEÜ, Jean-François; NICU, Liviu

2013-01-01

In this work, we demonstrate the integration of piezoelectric actuation means on arrays of nanocantilevers at the wafer scale. We use lead titanate zirconate (PZT) as piezoelectric material mainly because of its excellent actuation properties even when geometrically constrained at extreme scale

Study of piezoelectric filler on the properties of PZT-PVDF composites

Science.gov (United States)

Matei, Alina; Å¢ucureanu, Vasilica; Vlǎzan, Paulina; Cernica, Ileana; Popescu, Marian; RomaniÅ£an, Cosmin

2017-12-01

The ability to obtain composites with desired functionalities is based on advanced knowledge of the processes synthesis and of the structure of piezoceramic materials, as well the incorporation of different fillers in selected polymer matrix. Polyvinylidene fluoride (PVDF) is a fluorinated polymer with excellent mechanical and electric properties, which it was chosen as matrix due to their applications in a wide range of industrial fields [1-4]. The present paper focuses on the development of composites based on PZT particles as filler obtained by conventional methods and PVDF as polymer matrix. The synthesis of PVDF-PZT composites was obtained by dispersing the ceramic powders in a solution of PVDF in N-methyl-pyrrolidone (NMP) under mechanical mixing and ultrasonication, until a homogenous mixture is obtained. The properties of the piezoceramic fillers before and after embedding into the polymeric matrix were investigated by Fourier transform infrared spectrometry, field emission scanning electron microscopy and X-ray diffraction. In the FTIR spectra, appear a large number of absorption bands which are exclusive of the phases from PVDF matrix confirming the total embedding of PZT filler into matrix. Also, the XRD pattern of the composites has confirmed the presence of crystalline phases of PVDF and the ceramic phase of PZT. The SEM results showed a good distribution of fillers in the matrix.

High Reliability Cryogenic Piezoelectric Valve Actuator, Phase I

Data.gov (United States)

National Aeronautics and Space Administration — Piezoelectric actuators constructed with the "smart material" PZT offer many potential advantages for use in NASA cryo-valve missions relative to conventional...

Piezoelectric paints as one approach to smart structural materials with health-monitoring capabilities

Science.gov (United States)

Egusa, Shigenori; Iwasawa, Naozumi

1998-08-01

Piezoelectric paints have a potential to change a conventional structural material into an intelligent material system with health-monitoring capabilities such as vibration sensing and damage detection. Such paints were prepared using lead zirconate titanate (PZT) ceramic powder as a pigment and epoxy resin as a binder. The obtained paints were coated on aluminum test specimens, and were cured at room temperature or at 150 0964-1726/7/4/002/img5, thus forming the paint films having different thicknesses of 25-300 0964-1726/7/4/002/img6. These films were then poled at room temperature, and were evaluated with regard to the sensitivities as vibration and acoustic emission sensors in the frequency ranges of 0-250 Hz and 0-1.0 MHz, respectively. This paper mainly describes the effects of the film thickness and the cure temperature on the poling behavior of the PZT/epoxy paint film. This paper describes also the application of the paint film as a vibration modal sensor integrated into a structural material.

PMN-PT-PZT composite films for high frequency ultrasonic transducer applications.

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Hsu, Hsiu-Sheng; Benjauthrit, Vatcharee; Zheng, Fan; Chen, Rumin; Huang, Yuhong; Zhou, Qifa; Shung, K Kirk

2012-06-01

We have successfully fabricated x (0.65PMN-0.35PT)-(1 - x )PZT ( x PMN-PT-(1 - x )PZT), where x is 0.1, 0.3, 0.5, 0.7 and 0.9, thick films with a thickness of approximately 9 µm on platinized silicon substrate by employing a composite sol-gel technique. X-ray diffraction analysis and scanning electron microscopy revealed that these films are dense and creak-free with well-crystallized perovskite phase in the whole composition range. The dielectric constant can be controllably adjusted by using different compositions. Higher PZT content of x PMN-PT-(1 - x )PZT films show better ferroelectric properties. A representative 0.9PMN-PT-0.1PZT thick film transducer is built. It has 200 MHz center frequency with a -6 dB bandwidth of 38% (76 MHz). The measured two-way insertion loss is 65 dB.

Performance of PZT stacks under high-field electric cycling at various temperatures in heavy-duty diesel engine fuel injectors

Science.gov (United States)

Wang, Hong; Lee, Sung-Min; Lin, Hua-Tay; Stafford, Randy

2016-04-01

Testing and characterization of large prototype lead zirconate titanate (PZT) stacks present substantial technical challenges to electronic systems. The work in this study shows that an alternative approach can be pursued by using subunits extracted from prototype stacks. Piezoelectric and dielectric integrity was maintained even though the PZT plate specimens experienced an additional loading process involved with the extraction after factory poling. Extracted 10-layer plate specimens were studied by an electric cycle test under an electric field of 3.0/0.0 kV/mm, 100 Hz to 108 cycles, both at room temperature (22°C) and at 50°C. The elevated temperature had a defined impact on the fatigue of PZT stacks. About 48 and 28% reductions were observed in the piezoelectric and dielectric coefficients, respectively, after 108 cycles at 50°C, compared with reductions of 25 and 15% in the respective coefficients at 22°C. At the same time, the loss tangent varied to a limited extent. The evolution of PZT-electrode interfacial layers or nearby dielectric layers should account for the difference in the fatigue rates of piezoelectric and dielectric coefficients. But the basic contribution to observed fatigue may result from the buildup of a bias field that finally suppressed the motion of the domain walls. Finally, monitoring of dielectric coefficients can be an effective tool for on-line lifetime prediction of PZT stacks in service if a failure criterion is defined properly.

Enhanced Piezoelectric Response in HybridPerovskite via Interfacing with Ferroelectric Pb(Zr,Ti)O3

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Song, Jingfeng; Xiao, Zhiyong; Chen, Bo; Prockish, Spencer; Chen, Xuegang; Wang, Dong; Huang, Jinsong; Hong, Xia

In this work, we have carried out a comprehensive study of the piezoelectric properties of polycrystalline hybrid perovskite CH3NH3PbI3 (MAPbI3) thin films on two types of substrates. We spin coated 20-100 nm MAPbI3 thin films on gold and ferroelectric Pb(Zr,Ti)O3 (PZT), and characterized their piezoelectric coefficient d33 using piezoresponse force microscopy (PFM). The MAPbI3 thin films on gold showed a d33 of 0.4 pm/V. The epitaxial PZT films ( 50 nm) were deposited on (La,Sr)MnO3/SrTiO3 substrates, with polarization uniformly oriented in the up direction. For MAPbI3 films on PZT, there are regions showing clear PFM phase response, suggesting that MAPbI3 is polar with out-of-plane polarization. The PFM amplitude image of MAPbI3 indicated the existence of both constructive and destructive piezoresponse with that of PZT. The extracted d33is4 pm/V, 10-fold higher than that on gold. The enhanced piezoresponse is attributed to the dipole-dipole interaction between MAPbI3 and PZT. Our study points to an effective route to engineer the piezoelectric properties MAPbI3 for applications such as mechanical actuators and energy harvesting.

Investigation of trapped thickness-twist waves induced by functionally graded piezoelectric material in an inhomogeneous plate

International Nuclear Information System (INIS)

Li, Peng; Jin, Feng; Cao, Xiao-Shan

2013-01-01

The effect of functional graded piezoelectric materials on the propagation of thickness-twist waves is investigated through equations of the linear theory of piezoelectricity. The elastic and piezoelectric coefficients, dielectric permittivity, and mass density are assumed to change in a linear form but with different graded parameters along the wave propagation direction. We employ the power-series technique to solve the governing differential equations with variable coefficients attributed to the different graded parameters and prove the correction and convergence of this method. As a special case, the functional graded middle layer resulting from piezoelectric damage and material bonding is investigated. Piezoelectric damaged material can facilitate energy trapping, which is impossible in perfect materials. The increase in the damaged length and the reduction in the piezoelectric coefficient decrease the resonance frequency but increase the number of modes. Higher modes of thickness-twist waves appear periodically along the damaged length. Moreover, the displacement of the center of the damaged portion is neither symmetric nor anti-symmetric, unlike the non-graded plate. The conclusions are theoretically and practically significant for wave devices. (paper)

Piezoelectric and Semiconducting Ribbon for Flexible Energy Harvesting

Science.gov (United States)

2012-06-08

ES) 10. SPONSOR/MONITOR’S ACRONYM(S) Space and Naval Warfare Systems Command SPA WAR 11. SPONSOR/MONITOR’S REPORT NUMBER(S) 12. DISTRIBUTION...rubbers could yield breakthroughs in implantable or wearable energy harvesting systems . Being electromechanically coupled, piezoelectric crystals...ctuator d33 (pm/V) PZT PVDF Quartz Bone PZT > 80% Conversion Efficiency 3333 dk  VdE 2233 Energy 250 25 2.5

No linealidad en muestras cerámicas de PZT muy delgadas

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de Frutos, J.

1999-10-01

Full Text Available The development of piezoelectric sensors for high frequency requires to work with very thin samples of material. At this thick nesses, the stress concentration produces strong perturbations in the materials, and the origin oF a non linear response, which depends field on working conditions. With the goal to advance in the knowledgement of this phenomenon, and by using Complex Impedance Spectroscopy, we have analysed the response of PZT ceramics with thickness of microns as a function of the applied and the amplitude of the analysis signal. These results allow to establish the base to the development of ultrasonic tunable sensors for high frequency.

El desarrollo de sensores piezoeléctricos de alta frecuencia, exige trabajar con muestras de material muy delgadas, del orden de micras. En estos espesores, las tensiones de trabajo causan fuertes perturbaciones en los materiales, provocando respuestas no lineales, sumamente dependientes de las condiciones de trabajo. Con el objetivo de avanzar en el conocimiento de este fenómeno, y haciendo uso de la técnica de Espectroscopia de Impedancia Compleja, hemos analizado la respuesta de muestras de PZT cerámico adelgazadas a espesores de micras, en función del campo aplicado y de la amplitud de la señal de análisis. El estudio de estos resultados, puede permitir sentar las bases para el desarrollo de sensores ultrasónicos de alta frecuencia sintonizables.

A flexible ultrasound transducer array with micro-machined bulk PZT.

Science.gov (United States)

Wang, Zhe; Xue, Qing-Tang; Chen, Yuan-Quan; Shu, Yi; Tian, He; Yang, Yi; Xie, Dan; Luo, Jian-Wen; Ren, Tian-Ling

2015-01-23

This paper proposes a novel flexible piezoelectric micro-machined ultrasound transducer, which is based on PZT and a polyimide substrate. The transducer is made on the polyimide substrate and packaged with medical polydimethylsiloxane. Instead of etching the PZT ceramic, this paper proposes a method of putting diced PZT blocks into holes on the polyimide which are pre-etched. The device works in d31 mode and the electromechanical coupling factor is 22.25%. Its flexibility, good conformal contacting with skin surfaces and proper resonant frequency make the device suitable for heart imaging. The flexible packaging ultrasound transducer also has a good waterproof performance after hundreds of ultrasonic electric tests in water. It is a promising ultrasound transducer and will be an effective supplementary ultrasound imaging method in the practical applications.

A Flexible Ultrasound Transducer Array with Micro-Machined Bulk PZT

Directory of Open Access Journals (Sweden)

Zhe Wang

2015-01-01

Full Text Available This paper proposes a novel flexible piezoelectric micro-machined ultrasound transducer, which is based on PZT and a polyimide substrate. The transducer is made on the polyimide substrate and packaged with medical polydimethylsiloxane. Instead of etching the PZT ceramic, this paper proposes a method of putting diced PZT blocks into holes on the polyimide which are pre-etched. The device works in d31 mode and the electromechanical coupling factor is 22.25%. Its flexibility, good conformal contacting with skin surfaces and proper resonant frequency make the device suitable for heart imaging. The flexible packaging ultrasound transducer also has a good waterproof performance after hundreds of ultrasonic electric tests in water. It is a promising ultrasound transducer and will be an effective supplementary ultrasound imaging method in the practical applications.

PMN-PT–PZT composite films for high frequency ultrasonic transducer applications

Science.gov (United States)

Hsu, Hsiu-Sheng; Benjauthrit, Vatcharee; Zheng, Fan; Chen, Rumin; Huang, Yuhong; Zhou, Qifa; Shung, K. Kirk

2013-01-01

We have successfully fabricated x(0.65PMN-0.35PT)–(1 − x)PZT (xPMN-PT–(1 − x)PZT), where x is 0.1, 0.3, 0.5, 0.7 and 0.9, thick films with a thickness of approximately 9 µm on platinized silicon substrate by employing a composite sol–gel technique. X-ray diffraction analysis and scanning electron microscopy revealed that these films are dense and creak-free with well-crystallized perovskite phase in the whole composition range. The dielectric constant can be controllably adjusted by using different compositions. Higher PZT content of xPMN-PT–(1 − x)PZT films show better ferroelectric properties. A representative 0.9PMN-PT–0.1PZT thick film transducer is built. It has 200 MHz center frequency with a −6 dB bandwidth of 38% (76 MHz). The measured two-way insertion loss is 65 dB. PMID:23750072

Modeling of Magnetoelectric Interaction in Magnetostrictive-Piezoelectric Composites

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M. I. Bichurin

2012-01-01

Full Text Available The paper dwells on the theoretical modeling of magnetoelectric (ME effect in layered and bulk composites based on magnetostrictive and piezoelectric materials. Our analysis rests on the simultaneous solution of elastodynamic or elastostatic and electro/magnetostatic equations. The expressions for ME coefficients as the functions of material parameters and volume fractions of components are obtained. Longitudinal, transverse, and in-plane cases are considered. The use of the offered model has allowed to present the ME effect in ferrite cobalt-barium titanate, ferrite cobalt-PZT, ferrite nickel-PZT, and lanthanum strontium manganite-PZT composites adequately.

Determination of temperature dependence of piezoelectric coefficients matrix of lead zirconate titanate ceramics by quasi-static and resonance method

International Nuclear Information System (INIS)

Li Fei; Xu Zhuo; Wei Xiaoyong; Yao Xi

2009-01-01

The piezoelectric coefficients (d 33 , -d 31 , d 15 , g 33 , -g 31 , g 15 ) of soft and hard lead zirconate titanate ceramics were measured by the quasi-static and resonance methods, at temperatures from 20 to 300 0 C. The results showed that the piezoelectric coefficients d 33 , -d 31 and d 15 obtained by these two methods increased with increasing temperature for both hard and soft PZT ceramics, while the piezoelectric coefficients g 33 , -g 31 and g 15 decreased with increasing temperature for both hard and soft PZT ceramics. In this paper, the observed results were also discussed in terms of intrinsic and extrinsic contributions to piezoelectric response.

Piezoelectric displacement in ceramics

International Nuclear Information System (INIS)

Stewart, M.; Cain, M.; Gee, M.

1999-01-01

This Good Practice Guide is intended to aid a user to perform displacement measurements on piezoelectric ceramic materials such as PZT (lead zirconium titanate) in either monolithic or multilayer form. The various measurement issues that the user must consider are addressed, and good measurement practise is described for the four most suitable methods. (author)

Misfit strain dependence of ferroelectric and piezoelectric properties of clamped (001) epitaxial Pb(Zr0.52,Ti0.48)O3 thin films

Science.gov (United States)

Nguyen, Minh D.; Dekkers, Matthijn; Houwman, Evert; Steenwelle, Ruud; Wan, Xin; Roelofs, Andreas; Schmitz-Kempen, Thorsten; Rijnders, Guus

2011-12-01

A study on the effects of the residual strain in Pb(Zr0.52Ti0.48)O3 (PZT) thin films on the ferroelectric and piezoelectric properties is presented. Epitaxial (001)-oriented PZT thin film capacitors are sandwiched between SrRuO3 electrodes. The thin film stacks are grown on different substrate-buffer-layer combinations by pulsed laser deposition. Compressive or tensile strain caused by the difference in thermal expansion of the PZT film and substrate influences the ferroelectric and piezoelectric properties. All the PZT stacks show ferroelectric and piezoelectric behavior that is consistent with the theoretical model for strained thin films in the ferroelectric r-phase. We conclude that clamped (001) oriented Pb(Zr0.52Ti0.48)O3 thin films strained by the substrate always show rotation of the polarization vector.

Electrical Properties and Power Considerations of a Piezoelectric Actuator

Science.gov (United States)

Jordan, T.; Ounaies, Z.; Tripp, J.; Tcheng, P.

1999-01-01

This paper assesses the electrical characteristics of piezoelectric wafers for use in aeronautical applications such as active noise control in aircraft. Determination of capacitive behavior and power consumption is necessary to optimize the system configuration and to design efficient driving electronics. Empirical relations are developed from experimental data to predict the capacitance and loss tangent of a PZT5A ceramic as nonlinear functions of both applied peak voltage and driving frequency. Power consumed by the PZT is the rate of energy required to excite the piezoelectric system along with power dissipated due to dielectric loss and mechanical and structural damping. Overall power consumption is thus quantified as a function of peak applied voltage and driving frequency. It was demonstrated that by incorporating the variation of capacitance and power loss with voltage and frequency, satisfactory estimates of power requirements can be obtained. These relations allow general guidelines in selection and application of piezoelectric actuators and driving electronics for active control applications.

Direct strain energy harvesting in automobile tires using piezoelectric PZT–polymer composites

International Nuclear Information System (INIS)

Van den Ende, D A; Van de Wiel, H J; Groen, W A; Van der Zwaag, S

2012-01-01

Direct piezoelectric strain energy harvesting can be used to power wireless autonomous sensors in environments where low frequency, high strains are present, such as in automobile tires during operation. However, these high strains place stringent demands on the materials with respect to mechanical failure or depolarization, especially at elevated temperatures. In this work, three kinds of ceramic–polymer composite piezoelectric materials were evaluated and compared against state-of-the-art piezoelectric materials. The new composites are unstructured and structured composites containing granular lead zirconate titanate (PZT) particles or PZT fibers in a polyurethane matrix. The composites were used to build energy harvesting patches which were attached to a tire and tested under simulated rolling conditions. The energy density of the piezoelectric ceramic–polymer composite materials is initially not as high as that of the reference materials (a macro-fiber composite and a polyvinylidene fluoride polymer). However, the area normalized power output of the composites after temperature and strain cycling is comparable to that of the reference devices because the piezoelectric ceramic–polymer composites did not degrade during operation. (paper)

Embedded 3D electromechanical impedance model for strength monitoring of concrete using a PZT transducer

International Nuclear Information System (INIS)

Wang, Dansheng; Song, Hongyuan; Zhu, Hongping

2014-01-01

The electromechanical (EM) impedance approach in which piezoelectric ceramics (PZT) simultaneously act as both a sensor and an actuator due to their direct and inverse piezoelectric effects has emerged as a powerful tool for structural health monitoring in recent years. This paper formulates a new 3D electromechanical impedance model that characterizes the interaction between an embedded square PZT transducer and the host structure based on the effective impedance. The proposed formulations can be conveniently used to extract the mechanical impedance of the host structure from the electromechanical admittance measurements of an embedded PZT patch. The proposed model is verified by experimental and numerical results from a smart concrete cube in which a square PZT transducer is embedded. Subsequently, this paper also presents a new methodology to monitor the compressive strength of concrete based on the effective mechanical impedance. By extracting the effective mechanical impedances from the electromechanical admittance signatures, measuring the compressive strength of the concrete cubes at different ages and combining these measurements with the index of the correlation coefficient (CC), a linear correlation between the concrete strength gain and the CC of the real mechanical admittances was found. The proposed approach is found to be feasible to monitor the compressive strength of concrete by age. (paper)

Indirect Measurement of Energy Density of Soft PZT Ceramic Utilizing Mechanical Stress

Science.gov (United States)

Unruan, Muangjai; Unruan, Sujitra; Inkong, Yutthapong; Yimnirun, Rattikorn

2017-11-01

This paper reports on an indirect measurement of energy density of soft PZT ceramic utilizing mechanical stress. The method works analogous to the Olsen cycle and allows for a large amount of electro-mechanical energy conversion. A maximum energy density of 350 kJ/m3/cycle was found under 0-312 MPa and 1-20 kV/cm of applied mechanical stress and electric field, respectively. The obtained result is substantially higher than the results reported in previous studies of PZT materials utilizing a direct piezoelectric effect.

Progress in Dual (Piezoelectric-Magnetostrictive Phase Magnetoelectric Sintered Composites

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Rashed Adnan Islam

2012-01-01

Full Text Available The primary aims of this review article are (a to develop the fundamental understanding of ME behavior in perovskite piezoelectric-spinel magnetostrictive composite systems, (b to identify the role of composition, microstructural variables, phase transformations, composite geometry, and postsintering heat treatment on ME coefficient, and (c to synthesize, characterize, and utilize the high ME coefficient composite. The desired range of ME coefficient in the sintered composite is 0.5–1 V/cm⋅Oe. The studies showed that the soft piezoelectric phase quantified by smaller elastic modulus, large grain size of piezoelectric phase (~1 μm, and layered structures yields higher magnitude of ME coefficient. It is also found that postsintering thermal treatment such as annealing and aging alters the magnitude of magnetization providing an increase in the magnitude of ME coefficient. A trilayer composite was synthesized using pressure-assisted sintering with soft phase [0.9 PZT–0.1 PZN] having grain size larger than 1 μm and soft ferromagnetic phase of composition Ni0.8Cu0.2Zn0.2Fe2O4 [NCZF]. The composite showed a high ME coefficient of 412 and 494 mV/cm⋅Oe after sintering and annealing, respectively. Optimized ferrite to PZT thickness ratio was found to be 5.33, providing ME coefficient of 525 mV/cm⋅Oe. The ME coefficient exhibited orientation dependence with respect to applied magnetic field. Multilayering the PZT layer increased the magnitude of ME coefficient to 782 mV/cm⋅Oe. Piezoelectric grain texturing and nanoparticulate assembly techniques were incorporated with the layered geometry. It was found that with moderate texturing, d33 and ME coefficient reached up to 325 pC/N and 878 mV/cm⋅Oe, respectively. Nanoparticulate core shell assembly shows the promise for achieving large ME coefficient in the sintered composites. A systematic relationship between composition, microstructure, geometry, and properties is

Energy harvesting via thermo-piezoelectric transduction within a heated capillary

Science.gov (United States)

Monroe, J. G.; Bhandari, M.; Fairley, J.; Myers, O. J.; Shamsaei, N.; Thompson, S. M.

2017-07-01

Thermal-to-kinetic-to-electrical energy conversion is demonstrated through the use of a piezoelectric transducer (PZT) integrated within a section of an oscillating heat pipe (OHP) partially filled with water. The sealed PZT transducer was configured as a bow spring parallel to the dominant flow direction within the OHP. The bottom portion of the OHP was heated in increments of 50 W, while its top portion was actively cooled via water blocks. At ˜50 W, the internal fluid started to oscillate at ˜2-4 Hz due to the non-uniform vapor pressure generated in the OHP evaporator. Low-frequency fluid "pulses" were observed to occur across the flexed, in-line piezoelectric transducer, resulting in its deflection and measureable voltage spikes ranging between 24 and 63 mV. The OHP, while having its internal fluid enthalpy harvested, was found to still have an ultra-high thermal conductivity on-the-order of 10 kW/m K; however, its maximum operating heat load decreased due to the pressure drop introduced by the PZT material. The thermo-piezoelectric harvesting concept made possible via the thermally driven fluid oscillations within an OHP provides a passive method for combined energy harvesting and thermal management that is both scalable and portable.

Monitoring of bone healing by piezoelectric-EMI method

Science.gov (United States)

Mazlina, M. H.; Sarpinah, Bibi; Tawie, Rudy; Daho, Claira Dalislone; Annuar, Ishak

2016-02-01

Smart Piezoelectric devices which have excellent piezoelectric properties have been employed for various sensor and actuators applications. The work presented here is an attempt to demonstrate the feasibility of bone healing monitoring by using piezoelectric-electromechanical impedance (EMI) method that have several advantages such as low cost, portable, light weight and simplicity in measurement. A Piezoelectric sensor (PZT) has been widely used in damage detection of various structures including concrete, pipes and bones due to their unique sensing and actuating properties. The EMI technique has emerged as a universal Structural Health Monitoring (SHM) tool suitable for almost all engineering materials and structures. The method used for this proposed study consists of put healing agent in the host structure in particular cracks bone to be monitored by PZT-needle sensor which is embedded to the host structure. The measurements were taken in the frequency range between 0.04 to 100 kHz at 1 kHz interval using AD5933 evaluation board. The signals retrieved from the AD5933 evaluation board, were quantify and analyse to obtain Root Mean Square Deviation (RMSD) percentage value. Measurements were taken every hour for 12 hours. The result from the study shows the feasibility of the piezoelectric-EMI method to effectively detect changes during bone-cracks healing process until the cracks bone is fully recovered.

The thickness effect of Bi3.25La0.75Ti3O12 buffer layer in PbZr0.58Ti0.42O3/Bi3.25La0.75Ti3O12 (PZT/BLT) multilayered ferroelectric thin films

International Nuclear Information System (INIS)

Li Jianjun; Li Ping; Zhang Guojun; Yu Jun; Wu Yunyi; Wen Xinyi

2011-01-01

A series of PbZr 0.58 Ti 0.42 O 3 (PZT) thin films with various Bi 3.25 La 0.75 Ti 3 O 12 (BLT) buffer layer thicknesses were deposited on Pt/TiO 2 /SiO 2 /p-Si(100) substrates by RF magnetron sputtering. The X-ray diffraction measurements of PZT film and PZT/BLT multilayered films illustrate that the pure PZT film shows (111) preferential orientation, and the PZT/BLT films show (110) preferential orientation with increasing thickness of the BLT layer. There are no obvious diffraction peaks for the BLT buffer layer in the multilayered films, for interaction effect between the bottom BLT and top PZT films during annealing at the same time. From the surface images of field-emission scanning electron microscope, there are the maximum number of largest-size grains in PZT/BLT(30 nm) film among all the samples. The growth direction and grain size have significant effects on ferroelectric properties of the multilayered films. The fatigue characteristics of PZT and PZT/BLT films suggest that 30-nm-thick BLT is just an effective buffer layer enough to alleviate the accumulation of oxygen vacancies near the PZT/BLT interface. The comparison of these results with that of PZT/Pt/TiO 2 /SiO 2 /p-Si(100) basic structured film suggests that the buffer layer with an appropriate thickness can improve the ferroelectric properties of multilayered films greatly.

In situ 2D diffraction as a tool to characterize ferroelectric and piezoelectric thin films

Science.gov (United States)

Khamidy, N. I.; Kovacova, V.; Bernasconi, A.; Le Rhun, G.; Vaxelaire, N.

2017-08-01

In this paper the application of 2D x-ray diffraction (XRD2) as a technique to characterize in situ during electrical cycling the properties of a ferroelectric and piezoelectric thin film is discussed. XRD2 is one type of XRD on which a 2D detector is used instead of a point detector. This technique enables simultaneous recording of many sample information in a much shorter time compared to conventional XRD. The discussion is focused especially on the data processing technique of the huge data acquired. The methodology to calculate an effective piezoelectric coefficient, analyze the phase and texture, and estimate the domain size and shape is described in this paper. This methodology is then applied to a lead zirconate titanate (PZT) thin film at the morphotropic phase boundary (MPB) composition (i.e. Pb[Zr0.52Ti0.48]O3) with a preferred orientation of (1 0 0). The in situ XRD2 characterization was conducted in the European synchrotron radiation facility (ESRF) in Grenoble, France. Since a high-energy beam with vertical resolution as small as 100 nm was used, a cross-sectional scan of the sample was performed over the entire thickness of the film. From these experimental results, a better understanding on the piezoelectricity phenomena in PZT thin film at MPB composition were achieved, providing original feedback between the elaboration processes and functional properties of the film.

Sensitivity of PZT Impedance Sensors for Damage Detection of Concrete Structures.

Science.gov (United States)

Yang, Yaowen; Hu, Yuhang; Lu, Yong

2008-01-21

Piezoelectric ceramic Lead Zirconate Titanate (PZT) based electro-mechanicalimpedance (EMI) technique for structural health monitoring (SHM) has been successfullyapplied to various engineering systems. However, fundamental research work on thesensitivity of the PZT impedance sensors for damage detection is still in need. In thetraditional EMI method, the PZT electro-mechanical (EM) admittance (inverse of theimpedance) is used as damage indicator, which is difficult to specify the effect of damage onstructural properties. This paper uses the structural mechanical impedance (SMI) extractedfrom the PZT EM admittance signature as the damage indicator. A comparison study on thesensitivity of the EM admittance and the structural mechanical impedance to the damages ina concrete structure is conducted. Results show that the SMI is more sensitive to the damagethan the EM admittance thus a better indicator for damage detection. Furthermore, this paperproposes a dynamic system consisting of a number of single-degree-of-freedom elementswith mass, spring and damper components to model the SMI. A genetic algorithm isemployed to search for the optimal value of the unknown parameters in the dynamic system.An experiment is carried out on a two-storey concrete frame subjected to base vibrations thatsimulate earthquake. A number of PZT sensors are regularly arrayed and bonded to the framestructure to acquire PZT EM admittance signatures. The relationship between the damageindex and the distance of the PZT sensor from the damage is studied. Consequently, thesensitivity of the PZT sensors is discussed and their sensing region in concrete is derived.

A fatigue test method for Pb(Zr,Ti)O3 thin films by using MEMS-based self-sensitive piezoelectric microcantilevers

Science.gov (United States)

Kobayashi, T.; Maeda, R.; Itoh, T.

2008-11-01

In the present study, we propose a new method for the fatigue test of lead zirconate titanate (PZT) thin films for MEMS devices by using self-sensitive piezoelectric microcantilevers developed in our previous study. We have deposited PZT thin films on SOI wafers and fabricated the microcantilevers through the MEMS microfabrication process. In the self-sensitive piezoelectric microcantilevers, the PZT thin films are separated in order to act as an actuator and a sensor. The fatigue characteristic of the PZT thin films can be evaluated by measuring the output voltage of the sensor as a function of time. When a sine wave of 20 Vpp and a dc bias of 10 V were applied to the PZT thin films for an actuator, the output voltage of the sensor fell down after 107 fatigue cycles. We have also investigated the influence of amplitude of the actuation sine wave and dc bias on the fatigue of the PZT thin films by using the proposed fatigue test method.

A fatigue test method for Pb(Zr,Ti)O3 thin films by using MEMS-based self-sensitive piezoelectric microcantilevers

International Nuclear Information System (INIS)

Kobayashi, T; Maeda, R; Itoh, T

2008-01-01

In the present study, we propose a new method for the fatigue test of lead zirconate titanate (PZT) thin films for MEMS devices by using self-sensitive piezoelectric microcantilevers developed in our previous study. We have deposited PZT thin films on SOI wafers and fabricated the microcantilevers through the MEMS microfabrication process. In the self-sensitive piezoelectric microcantilevers, the PZT thin films are separated in order to act as an actuator and a sensor. The fatigue characteristic of the PZT thin films can be evaluated by measuring the output voltage of the sensor as a function of time. When a sine wave of 20 V pp and a dc bias of 10 V were applied to the PZT thin films for an actuator, the output voltage of the sensor fell down after 10 7 fatigue cycles. We have also investigated the influence of amplitude of the actuation sine wave and dc bias on the fatigue of the PZT thin films by using the proposed fatigue test method

Optimum Operating Conditions for PZT Actuators for Vibrotactile Wearables

Science.gov (United States)

Logothetis, Irini; Matsouka, Dimitra; Vassiliadis, Savvas; Vossou, Clio; Siores, Elias

2018-04-01

Recently, vibrotactile wearables have received much attention in fields such as medicine, psychology, athletics and video gaming. The electrical components presently used to generate vibration are rigid; hence, the design and creation of ergonomical wearables are limited. Significant advances in piezoelectric components have led to the production of flexible actuators such as piezoceramic lead zirconate titanate (PZT) film. To verify the functionality of PZT actuators for use in vibrotactile wearables, the factors influencing the electromechanical conversion were analysed and tested. This was achieved through theoretical and experimental analyses of a monomorph clamped-free structure for the PZT actuator. The research performed for this article is a three-step process. First, a theoretical analysis presents the equations governing the actuator. In addition, the eigenfrequency of the film was analysed preceding the experimental section. For this stage, by applying an electric voltage and varying the stimulating electrical characteristics (i.e., voltage, electrical waveform and frequency), the optimum operating conditions for a PZT film were determined. The tip displacement was measured referring to the mechanical energy converted from electrical energy. From the results obtained, an equation for the mechanical behaviour of PZT films as actuators was deduced. It was observed that the square waveform generated larger tip displacements. In conjunction with large voltage inputs at the predetermined eigenfrequency, the optimum operating conditions for the actuator were achieved. To conclude, PZT films can be adapted to assist designers in creating comfortable vibrotactile wearables.

Triple degree-of-freedom piezoelectric ultrasonic micromotor via flexural-axial coupled vibration.

Science.gov (United States)

Khoo, Ter Fong; Dang, Dinh Huy; Friend, James; Oetomo, Denny; Yeo, Leslie

2009-08-01

Actuators remain a limiting factor in robotics, especially in microrobotics where the power density of actuators is a problem. A 3 x 3 x 8.7 mm 3-axis piezoelectric ultrasonic micromotor system is described here in an effort to help solve this problem. Formed from 4 bulk lead zirconate titanate (PZT) thickness-polarized elements placed around the periphery of a rectangular rod, the stator is designed to combine axial and flexural vibrations in a way that permits rotation of a hardened steel ball as a rotor about an arbitrary axis. A simple prototype of the micromotor was found to produce at least a rotation speed of 10.4 rad/s with 4 microN-m torque about all 3 orthogonal directions at an excitation frequency of about 221 kHz, demonstrating the feasibility of a 3 degree-of-freedom millimeter-scale piezoelectric motor.

Acoustic emission characteristics during bending fracture process of piezoelectric composite actuators

International Nuclear Information System (INIS)

Woo, Sung Choong; Goo, Nam Seo

2006-01-01

The objective of this study is to investigate the damage mechanisms in a thin monolithic PZT wafer and an asymmetrically laminated piezoelectric composite actuator (PCA) under bending loading by the acoustic emission (AE) technique. Fracture surface examinations were conducted using a scanning electron microscope (SEM) and an optical microscope. Using the fabricated PCAs, correlations were established between the observed damage growth mechanisms and the AE results in terms of the AE amplitude and dominant frequency band which was processed by fast Fourier transform (FFT). These correlations can be used to monitor the damage evolution in the plate-type piezoelectric composite actuators exhibiting multiple modes of damage. Results from this study revealed that the AE technique is a powerful and effective tool for identifying damage mechanisms such as brittle fracture in the PZT, matrix cracking, fiber-matrix debonding, fiber breakage and delamination between the PZT layer and fiber composite layer in the asymmetrically laminated PCAs.

A sandwiched piezoelectric transducer with flex end-caps for energy harvesting in large force environments

International Nuclear Information System (INIS)

Kuang, Yang; Daniels, Alice; Zhu, Meiling

2017-01-01

This paper presents a sandwiched piezoelectric transducer (SPT) for energy harvesting in large force environments with increased load capacity and electric power output. The SPT uses (1) flex end-caps to amplify the applied load force so as to increase its power output and (2) a sandwiched piezoelectric-substrate structure to reduce the stress concentration in the piezoelectric material so as to increase the load capacity. A coupled piezoelectric-circuit finite element model (CPC-FEM) was developed, which is able to directly predict the electric power output of the SPT connected to a load resistor. The CPC-FEM was used to study the effects of various parameters of the SPT on the performance to obtain an optimal design. These parameters included the substrate thickness, the end-cap material and thickness, the electrode length, the joint length, the end-cap internal angle and the PZT thickness. A prototype with optimised parameters was tested on a loading machine, and the experimental results were compared with simulation. A good agreement was observed between simulation and experiment. When subjected to a 1 kN 2 Hz sinusoidal force applied by the loading machine, the SPT produced an average power of 4.68 mW. The application of the SPT as a footwear energy harvester was demonstrated by fitting the SPT into a boot and performing the tests on a treadmill, and the SPT generated an average power of 2.5 mW at a walking speed of 4.8 km h −1 . (paper)

Experimental Investigation on Admittance-Based Piezoelectric Sensor Diagnostic Process

Energy Technology Data Exchange (ETDEWEB)

Jo, Hyejin; Park, Tongil; Park, Gyuhae [Chonnam National University, Gwangju (Korea, Republic of)

2015-01-15

Structural health monitoring (SHM) techniques based on the use of active-sensing piezoelectric (PZT) materials have received considerable attention. The validation of the PZT functionality during SHM operation is critical to successfully implementing a reliable SHM system. In this study, we investigated several parameters that affect the admittance-based sensor diagnostic process. We experimentally identified the temperature dependency of the active-sensor diagnostic process. We found that the admittance-based sensor diagnostic process can differentiate the adhesion conditions of bonding materials that are used to install a PZT on a structure, which is important when designing a sensor diagnostic process for an SHM system.

Determination of temperature dependence of piezoelectric coefficients matrix of lead zirconate titanate ceramics by quasi-static and resonance method

Energy Technology Data Exchange (ETDEWEB)

Li Fei; Xu Zhuo; Wei Xiaoyong; Yao Xi, E-mail: lifei1216@gmail.co [Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education, Xi' an Jiaotong University, Xi' an 710049 (China)

2009-05-07

The piezoelectric coefficients (d{sub 33}, -d{sub 31}, d{sub 15}, g{sub 33}, -g{sub 31}, g{sub 15}) of soft and hard lead zirconate titanate ceramics were measured by the quasi-static and resonance methods, at temperatures from 20 to 300 {sup 0}C. The results showed that the piezoelectric coefficients d{sub 33}, -d{sub 31} and d{sub 15} obtained by these two methods increased with increasing temperature for both hard and soft PZT ceramics, while the piezoelectric coefficients g{sub 33}, -g{sub 31} and g{sub 15} decreased with increasing temperature for both hard and soft PZT ceramics. In this paper, the observed results were also discussed in terms of intrinsic and extrinsic contributions to piezoelectric response.

Vibration based monitoring of stay cable force using wireless piezoelectric based strain sensor nodes

International Nuclear Information System (INIS)

Nguyen, Khac Duy; Kim, Jeong Tae

2012-01-01

This study presents a method to monitor cable force using wireless sensor nodes and piezoelectric sensors. The following approaches are carried out to achieve the objective. Firstly, the principle of piezoelectric materials (e.g., PZT) as strain sensors is reviewed. A cable force estimation method using dynamic features of cables measured by piezoelectric materials is presented. Secondly, the design of an automated cable force monitoring system using the data acquisition sensor node Imote2/SHM DAQ is described. The sensor node is originally developed by University of Illinois at Urbana champaign and is adopted in this study to monitor strain induced voltage from PZT sensors. The advantages of the system are cheap, and eligible for wireless communication and automated operation. Finally, the feasibility of the proposed monitoring system is evaluated on a lab scaled cable

Moving antiplane shear crack in hexagonal piezoelectric crystals

International Nuclear Information System (INIS)

Tupholme, G.

1998-01-01

Closed form solutions are obtained and discussed for the stress and electric displacement fields around a loaded Griffith-type antiplane shear strip crack moving in hexagonal piezoelectric crystals. Representative numerical results are presented for ZnO and PZT-5H. (author)

Flexible Semitransparent Energy Harvester with High Pressure Sensitivity and Power Density Based on Laterally Aligned PZT Single-Crystal Nanowires.

Science.gov (United States)

Zhao, Quan-Liang; He, Guang-Ping; Di, Jie-Jian; Song, Wei-Li; Hou, Zhi-Ling; Tan, Pei-Pei; Wang, Da-Wei; Cao, Mao-Sheng

2017-07-26

A flexible semitransparent energy harvester is assembled based on laterally aligned Pb(Zr 0.52 Ti 0.48 )O 3 (PZT) single-crystal nanowires (NWs). Such a harvester presents the highest open-circuit voltage and a stable area power density of up to 10 V and 0.27 μW/cm 2 , respectively. A high pressure sensitivity of 0.14 V/kPa is obtained in the dynamic pressure sensing, much larger than the values reported in other energy harvesters based on piezoelectric single-crystal NWs. Furthermore, theoretical and finite element analyses also confirm that the piezoelectric voltage constant g 33 of PZT NWs is competitive to the lead-based bulk single crystals and ceramics, and the enhanced pressure sensitivity and power density are substantially linked to the flexible structure with laterally aligned PZT NWs. The energy harvester in this work holds great potential in flexible and transparent sensing and self-powered systems.

Piezoelectric response and electrical properties of Pb(Zr1-xTix)O3 thin films: The role of imprint and composition

Science.gov (United States)

Cornelius, T. W.; Mocuta, C.; Escoubas, S.; Merabet, A.; Texier, M.; Lima, E. C.; Araujo, E. B.; Kholkin, A. L.; Thomas, O.

2017-10-01

The compositional dependence of the piezoelectric properties of self-polarized PbZr1-xTixO3 (PZT) thin films deposited on Pt/TiO2/SiO2/Si substrates (x = 0.47, 0.49 and 0.50) was investigated by in situ synchrotron X-ray diffraction and electrical measurements. The latter evidenced an imprint effect in the studied PZT films, which is pronounced for films with the composition of x = 0.50 and tends to disappear for x = 0.47. These findings were confirmed by in situ X-ray diffraction along the crystalline [100] and [110] directions of the films with different compositions revealing asymmetric butterfly loops of the piezoelectric strain as a function of the electric field; the asymmetry is more pronounced for the PZT film with a composition of x = 0.50, thus indicating a higher built-in electric field. The enhancement of the dielectric permittivity and the effective piezoelectric coefficient at compositions around the morphotropic phase boundary were interpreted in terms of the polarization rotation mechanism and the monoclinic phase in the studied PZT thin films.

Extrinsic coefficient charcterisation of PZT ceramics near the morphotropic phase boundary

Directory of Open Access Journals (Sweden)

Albareda, A.

2006-06-01

Full Text Available PZT ceramics with high piezoelectric coefficients have high extrinsic contributions. This extrinsic behaviour, which is related to the domain wall movement, produces high non-linear effects that are sometimes inconvenient, for example when it increases the losses in power devices. The relation between extrinsic behaviour and non-linearities could be used to provide a good extrinsic characterization of materials in order to optimise the piezoelectric devices. In all cases the physical explanation of the behaviour is sought. The aim of this work is to study the dependence of the linear and non-linear dielectric, piezoelectric and mechanical coefficients on the Ti fraction in PZT ceramic compositions near the morphotropic phase boundary (MPB. The dependence of these coefficients on the defect concentration is also analysed. Hard ceramics belonging to Ferroperm Piezoceramics, with two different acceptor dopant levels, high and low, have been measured.

Las cerámicas PZT con coeficientes piezoeléctricos elevados poseen contribuciones extrínsecas grandes. Este comportamiento extrínseco, relacionado con el movimiento de las paredes de los dominios, comporta efectos no lineales grandes que no siempre son deseables, por ejemplo, al incrementar las pérdidas de los dispositivos piezoeléctricos. Esta correspondencia entre efectos extrínsecos y no linealidades puede ser utilizada para caracterizar las cerámicas con el fin de optimizar sus propiedades piezoeléctricas. En todos los casos se busca una interpretación física de los resultados obtenidos. El objetivo de este trabajo es el estudio de la dependencia de los coeficientes lineales y no lineales dieléctricos, piezoeléctricos y elásticos con la fracción de Ti en cerámicas PZT con composiciones de Zr-Ti cerca de la transición de fase morfotrópica (MPB. También se analiza la dependencia de estos coeficientes con la concentración de impurezas, utilizando para ello cerámicas de

Development of a stress sensor based on the piezoelectric lead zirconate titanate for impact stress measurement

Science.gov (United States)

Liu, Yiming; Xu, Bin; Li, Lifei; Li, Bing

2012-04-01

The measurement of stress of concrete structures under impact loading and other strong dynamic loadings is crucial for the monitoring of health and damage detection. Due to its main advantages including availability, extremely high rigidity, high natural frequency, wide measuring range, high stability, high reproducibility, high linearity and wide operating temperature range, piezoelectric (Lead Zirconate Titanate, PZT) ceramic materials has been a widely used smart material for both sensing and actuation for monitoring and control in engineering structures. In this paper, a kind of stress sensor based on piezoelectric ceramics for impact stress measuring of concrete structures is developed. Because the PZT is fragile, in order to employ it for the health monitoring of concrete structures, special handling and treatment should be taken to protect the PZT and to make it survive and work properly in concrete. The commercially available PZT patch with lead wires is first applied with an insulation coating to prevent water and moisture damage, and then is packaged by jacketing it by two small precasted cylinder concrete blocks with enough strength to form a smart aggregate (SA). The employed PZT patch has a dimension of 10mm x 10mm x 0.3mm. In order to calibrate the PZT based stress sensor for impact stress measuring, a dropping hammer was designed and calibration test on the sensitivity of the proposed transducer was carried out with an industry charge amplifier. The voltage output of the stress sensor and the impact force under different free falling heights and impact mass were recorded with a high sampling rate data acquisition system. Based on the test measurements, the sensibility of the PZT based stress sensor was determined. Results show that the output of the PZT based stress sensor is proportional to the stress level and the repeatability of the measurement is very good. The self-made piezoelectric stress sensor can be easily embedded in concrete and provide

Effect of External Vibration on PZT Impedance Signature

Directory of Open Access Journals (Sweden)

Yaowen Yang

2008-11-01

Full Text Available Piezoelectric ceramic Lead Zirconate Titanate (PZT transducers, working on the principle of electromechanical impedance (EMI, are increasingly applied for structural health monitoring (SHM in aerospace, civil and mechanical engineering. The PZT transducers are usually surface bonded to or embedded in a structure and subjected to actuation so as to interrogate the structure at the desired frequency range. The interrogation results in the electromechanical admittance (inverse of EMI signatures which can be used to estimate the structural health or integrity according to the changes of the signatures. In the existing EMI method, the monitored structure is only excited by the PZT transducers for the interrogating of EMI signature, while the vibration of the structure caused by the external excitations other than the PZT actuation is not considered. However, many structures work under vibrations in practice. To monitor such structures, issues related to the effects of vibration on the EMI signature need to be addressed because these effects may lead to misinterpretation of the structural health. This paper develops an EMI model for beam structures, which takes into account the effect of beam vibration caused by the external excitations. An experimental study is carried out to verify the theoretical model. A lab size specimen with different external excitations is tested and the effect of vibration on EMI signature is discussed.

Effect of External Vibration on PZT Impedance Signature.

Science.gov (United States)

Yang, Yaowen; Miao, Aiwei

2008-11-01

Piezoelectric ceramic Lead Zirconate Titanate (PZT) transducers, working on the principle of electromechanical impedance (EMI), are increasingly applied for structural health monitoring (SHM) in aerospace, civil and mechanical engineering. The PZT transducers are usually surface bonded to or embedded in a structure and subjected to actuation so as to interrogate the structure at the desired frequency range. The interrogation results in the electromechanical admittance (inverse of EMI) signatures which can be used to estimate the structural health or integrity according to the changes of the signatures. In the existing EMI method, the monitored structure is only excited by the PZT transducers for the interrogating of EMI signature, while the vibration of the structure caused by the external excitations other than the PZT actuation is not considered. However, many structures work under vibrations in practice. To monitor such structures, issues related to the effects of vibration on the EMI signature need to be addressed because these effects may lead to misinterpretation of the structural health. This paper develops an EMI model for beam structures, which takes into account the effect of beam vibration caused by the external excitations. An experimental study is carried out to verify the theoretical model. A lab size specimen with different external excitations is tested and the effect of vibration on EMI signature is discussed.

Piezoelectric ultrasonic micromotor with 1.5 mm diameter.

Science.gov (United States)

Dong, Shuxiang; Lim, Siak P; Lee, Kwork H; Zhang, Jingdong; Lim, Leong C; Uchino, Kenji

2003-04-01

A piezoelectric ultrasonic micromotor has been developed using a lead zirconate titanate (PZT) ceramic/metal composite tube stator that was 1.5 mm in diameter and 7 mm in length. The micromotor was operated in its first bending vibration mode (approximately 70 kHz), producing speeds from hundreds to over 2000 rpm in both rotational directions. The maximum torque-output was 45 microN-m, which is far superior to previous PZT thin film-based micromotors. This micromotor showed good reliability and stability for more than 300 hours of continued operation.

Relation of the external mechanical stress to the properties of piezoelectric materials for energy harvesting

Science.gov (United States)

Jeong, Soon-Jong; Kim, Min-Soo; Lee, Dae-Su; Song, Jae-Sung; Cho, Kyung-Ho

2013-12-01

We investigated the piezoelectric properties and the generation of voltage and power under the mechanical compressive loads for three types of piezoelectric ceramics 0.2Pb(Mg1/3Nb2/3)O3-0.8Pb(Zr0.475Ti0.525)O3 (soft-PZT), 0.1Pb(Mg1/3Sb2/3)O3- 0.9Pb(Zr0.475Ti0.525)O3 (hard-PZT) and [0.675Pb(Mg1/3Nb2/3)O3-0.35PbTiO3]+5 wt% BaTiO3 (textured-PMNT). The piezoelectric d 33 coefficients of all specimens increased with increasing compressive load. The generated voltage and power showed a linear relation and square relation to the applied stress, respectively. These results were larger than those calculated using the simple piezoelectric equation due to the non-linear characteristics of the ceramics, so they were evaluated with a simple model based on a non-linear relation.

Piezoelectric PZT thin films on flexible copper-coated polymer films

Czech Academy of Sciences Publication Activity Database

Suchaneck, G.; Volkonskiy, O.; Gerlach, G.; Hubička, Zdeněk; Dejneka, Alexandr; Jastrabík, Lubomír; Kiselev, D.; Bdikin, I.; Kholkin, A.

636/637, - (2010), s. 392-397 ISSN 0255-5476 R&D Projects: GA ČR GC202/09/J017; GA AV ČR KJB100100703 Institutional research plan: CEZ:AV0Z10100522 Keywords : plasma jet deposition * PZT * kapton® film substrate * piezoresponse force microscopy Subject RIV: BM - Solid Matter Physics ; Magnetism

Optimizing Pt/TiO2 templates for textured PZT growth and MEMS devices

Science.gov (United States)

Potrepka, Daniel; Fox, Glenn; Sanchez, Luz; Polcawich, Ronald

2013-03-01

Crystallographic texture of lead zirconate titanate (PZT) thin films strongly influences piezoelectric properties used in MEMS applications. Textured growth can be achieved by relying on crystal growth habit and can also be initiated by the use of a seed-layer heteroepitaxial template. Template choice and the process used to form it determine structural quality, ultimately influencing performance and reliability of MEMS PZT devices such as switches, filters, and actuators. This study focuses on how 111-textured PZT is generated by a combination of crystal habit and templating mechanisms that occur in the PZT/bottom-electrode stack. The sequence begins with 0001-textured Ti deposited on thermally grown SiO2 on a Si wafer. The Ti is converted to 100-textured TiO2 (rutile) through thermal oxidation. Then 111-textured Pt can be grown to act as a template for 111-textured PZT. Ti and Pt are deposited by DC magnetron sputtering. TiO2 and Pt film textures and structure were optimized by variation of sputtering deposition times, temperatures and power levels, and post-deposition anneal conditions. The relationship between Ti, TiO2, and Pt texture and their impact on PZT growth will be presented. Also affiliated with U.S. Army Research Lab, Adelphi, MD 20783, USA

Effect of porosity on dielectric properties and microstructure of porous PZT ceramics

Energy Technology Data Exchange (ETDEWEB)

Kumar, B. Praveen [PZT Centre, Armament Research and Development Establishment, Pune 411021 (India); Kumar, H.H. [PZT Centre, Armament Research and Development Establishment, Pune 411021 (India); Kharat, D.K. [PZT Centre, Armament Research and Development Establishment, Pune 411021 (India)]. E-mail: dkkharat@rediffmail.com

2006-02-25

Porous piezoelectric materials are of great interest because of their high hydrostatic figure of merit and low sound velocity, which results in to low acoustic impedance and efficient coupling with medium. Porous lead zirconate titanate (PZT) ceramics with varying porosity was developed using polymethyl methacrylate by burnable plastic spheres (BURPS) process. The porous PZT ceramics were characterized for dielectric constant ({epsilon}), dielectric loss factor (tan {delta}), hydrostatic charge (d {sub h}) and voltage (g {sub h}) coefficients and microstructure. The effect of the porous microstructure on the dielectric constant and loss factor at frequencies of 10-10{sup 5} Hz are discussed in this paper.

High precision optical measurement of displacement and simultaneous determinations of piezoelectric coefficients

Science.gov (United States)

Gamboa, Bryan M.; Malladi, Madhuri; Vadlamani, Ramya; Guo, Ruyan; Bhalla, Amar

2016-09-01

PZT are also well known for their applications in Micro Electrical Mechanical Systems (MEMS). It is necessary to study the piezoelectric coefficients of the materials accurately in order to design a sensor as an example, which defines their strain dependent applications. Systematic study of the electro mechanic displacement measurement was conducted and compared using a white light fiber optic sensor, a heterodyne laser Doppler vibrometer, and a homodyne laser interferometry setup. Frequency dependent measurement is conducted to evaluate displacement values well below and near the piezoelectric resonances. UHF-120 ultra-high frequency Vibrometer is used to measure the longitudinal piezoelectric displacement or x33 and the MTI 2000 FotonicTM Sensor is used to measure the transverse piezoelectric displacement or x11 over 100Hz to 2MHz. A Multiphysics Finite Element Analysis method, COMSOL, is also adopted in the study to generate a three dimensional electromechanical coupled model based on experimentally determined strains x33 and x11 as a function of frequency of the electric field applied. The full family of piezoelectric coefficients of the poled electronic ceramic PZT, d33, d31, and d15, can be then derived, upon satisfactory simulation of the COMSOL. This is achieved without the usual need of preparation of piezoelectric resonators of fundamental longitudinal, transversal, and shear modes respectively.

Effect of the Sr and Fe incorporation on the Pzt electric and ceramic properties; Efeito da incorporacao de Sr e Fe nas propriedades ceramicas e eletricas de PZT

Energy Technology Data Exchange (ETDEWEB)

Santos, Marcia C. Cavaco dos [Instituto de Pesquisas da Marinha, Rio de Janeiro, RJ (Brazil); Villegas, Marina; Moure, Carlos [Instituto de Ceramica e Vidro, Madrid (Spain)

1997-12-31

The Piezoelectric Pzt properties with compositions near of morphotropic boundary phase can be usefully modified by adding small quantities of various oxides, such as, Fe{sub 2} O{sub 3} and Sr O, which Fe{sub 2} O{sub 3} has been studied due his property of decrease the Dielectric Loss factor and increase the Mechanical Quality Factor of PZT Ceramics. With this purpose a powder was synthesized through an organic precursors route, where a finely divided powder, with a good PZT phase formation at low temperatures. The electrical properties of temperatures. The electrical properties of the [Pb{sub 0.9.8} Sr 0{sub .53} Ti{sub o.4676} Fe{sub 0.00024} {sub 03}] compositions with 1% of Pb O excess confirmed the Fe{sub 2} (O{sub 3}) additive performance, counterbalancing with Sr O effects. (author) 7 refs., 5 figs., 3 tabs.

Pulsed laser deposited Pb(Zr,Ti)O3 thin films with excellent piezoelectric and mechanical properties

NARCIS (Netherlands)

Nazeer, H.; Nguyen, Duc Minh; Rijnders, Augustinus J.H.M.; Woldering, L.A.; Abelmann, Leon; Elwenspoek, Michael Curt

We present for the first time the combined measured piezoelectric and mechanical properties of epitaxial, (110) oriented Pb(ZrxTi1-x) (PZT) thin films grown on microfabricated silicon cantilevers using pulsed laser deposition (PLD, x=0.4, 0.52, 0.6 and 0.8). The grown PZT thin films develop a strong

Evaluation of electromechanical coupling parameters of piezoelectric materials by using piezoelectric cantilever with coplanar electrode structure in quasi-stasis.

Science.gov (United States)

Zheng, Xuejun; Zhu, Yuankun; Liu, Xun; Liu, Jing; Zhang, Yong; Chen, Jianguo

2014-02-01

Based on Timoshenko beam theory, a principle model is proposed to establish the relationship between electric charge and excitation acceleration, and in quasi-stasis we apply the direct piezoelectric effect of multilayer cantilever with coplanar electrode structure to evaluate the piezoelectric strain coefficient d15 and electromechanical coupling coefficient k15. They are measured as 678 pC/N and 0.74 for the commercial piezoelectric ceramic lead zirconate titanate (PZT-51) bulk specimen and 656 pC/N and 0.63 for the lead magnesium niobate (PMN) bulk specimen, and they are in agreement with the calibration and simulation values. The maximum of relative errors is less than 4.2%, so the proposed method is reliable and convenient.

Unexpectedly high piezoelectricity of Sm-doped lead zirconate titanate in the Curie point region.

Science.gov (United States)

Seshadri, Shruti B; Nolan, Michelle M; Tutuncu, Goknur; Forrester, Jennifer S; Sapper, Eva; Esteves, Giovanni; Granzow, Torsten; Thomas, Pam A; Nino, Juan C; Rojac, Tadej; Jones, Jacob L

2018-03-07

Large piezoelectric coefficients in polycrystalline lead zirconate titanate (PZT) are traditionally achieved through compositional design using a combination of chemical substitution with a donor dopant and adjustment of the zirconium to titanium compositional ratio to meet the morphotropic phase boundary (MPB). In this work, a different route to large piezoelectricity is demonstrated. Results reveal unexpectedly high piezoelectric coefficients at elevated temperatures and compositions far from the MPB. At temperatures near the Curie point, doping with 2 at% Sm results in exceptionally large piezoelectric coefficients of up to 915 pm/V. This value is approximately twice those of other donor dopants (e.g., 477 pm/V for Nb and 435 pm/V for La). Structural changes during the phase transitions of Sm-doped PZT show a pseudo-cubic phase forming ≈50 °C below the Curie temperature. Possible origins of these effects are discussed and the high piezoelectricity is posited to be due to extrinsic effects. The enhancement of the mechanism at elevated temperatures is attributed to the coexistence of tetragonal and pseudo-cubic phases, which enables strain accommodation during electromechanical deformation and interphase boundary motion. This work provides insight into possible routes for designing high performance piezoelectrics which are alternatives to traditional methods relying on MPB compositions.

Effect of the Sr and Fe incorporation on the Pzt electric and ceramic properties

International Nuclear Information System (INIS)

Santos, Marcia C. Cavaco dos; Villegas, Marina; Moure, Carlos

1997-01-01

The Piezoelectric Pzt properties with compositions near of morphotropic boundary phase can be usefully modified by adding small quantities of various oxides, such as, Fe 2 O 3 and Sr O, which Fe 2 O 3 has been studied due his property of decrease the Dielectric Loss factor and increase the Mechanical Quality Factor of PZT Ceramics. With this purpose a powder was synthesized through an organic precursors route, where a finely divided powder, with a good PZT phase formation at low temperatures. The electrical properties of temperatures. The electrical properties of the [Pb 0.9.8 Sr 0 .53 Ti o.4676 Fe 0.00024 ) 03 ] compositions with 1% of Pb O excess confirmed the Fe 2 O 3 ) additive performance, counterbalancing with Sr O effects. (author)

Influence of La in xPBBiN of ternary nanoceramic composite (1-x0.5PMN-0.5PZT-xPBBiN system by mechanic al activatio n technique for dielectric and piezoelectric properties

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K. CHANDRAMOULI

2011-06-01

Full Text Available (1-x[0.5Pb(Mg0.33Nb0.67O3-0.5Pb(Zr0.53Ti0.47O3]-x[Pb0.557Ba0.38La0.022Bi0.02Nb2O6] with both perovskite and tungsten bronze structured composite have been synthesized through mechanical activation technique. The strong influence of lanthanum addition to the lead-barium-bismuth-niobate (xPBLBiN ceramics in perovskite structured (1-xPMN-PZT on structural and functional properties is confirmed. X-ray diffraction patterns studies showed that these complex composites consisted of perovskite Cubic with tungsten bronze Orthorhombic phases. La modification in PBBiN of a ternary system (1-xPMN-PZTxPBBiN revealed intensified orthorhombicity. As La increased the dielectric and piezoelectric properties tremendously increased in (1-xPMN-PZT-xPBLBiN nanoceramic composite. The optimum dielectric and piezoelectric properties (εRT = 2931, kp = 0.461 and d33 = 428 pC/N were found in x =0.4 composite. We achieved novel nanocomposites synthesized by high energy ball milling method and having binary structures in a single composite with excellent functional properties that can be used for energy harvesting applications.

An Unconventional Inchworm Actuator Based on PZT/ERFs Control Technology.

Science.gov (United States)

Liu, Guojun; Zhang, Yanyan; Liu, Jianfang; Li, Jianqiao; Tang, Chunxiu; Wang, Tengfei; Yang, Xuhao

2016-01-01

An unconventional inchworm actuator for precision positioning based on piezoelectric (PZT) actuation and electrorheological fluids (ERFs) control technology is presented. The actuator consists of actuation unit (PZT stack pump), fluid control unit (ERFs valve), and execution unit (hydraulic actuator). In view of smaller deformation of PZT stack, a new structure is designed for actuation unit, which integrates the advantages of two modes (namely, diaphragm type and piston type) of the volume changing of pump chamber. In order to improve the static shear yield strength of ERFs, a composite ERFs valve is designed, which adopts the series-parallel plate compound structure. The prototype of the inchworm actuator has been designed and manufactured in the lab. Systematic test results indicate that the displacement resolution of the unconventional inchworm actuator reaches 0.038 μm, and the maximum driving force and velocity are 42 N, 14.8 mm/s, respectively. The optimal working frequency for the maximum driving velocity is 120 Hz. The complete research and development processes further confirm the feasibility of developing a new type of inchworm actuator with high performance based on PZT actuation and ERFs control technology, which provides a reference for the future development of a new type of actuator.

An Unconventional Inchworm Actuator Based on PZT/ERFs Control Technology

Directory of Open Access Journals (Sweden)

Guojun Liu

2016-01-01

Full Text Available An unconventional inchworm actuator for precision positioning based on piezoelectric (PZT actuation and electrorheological fluids (ERFs control technology is presented. The actuator consists of actuation unit (PZT stack pump, fluid control unit (ERFs valve, and execution unit (hydraulic actuator. In view of smaller deformation of PZT stack, a new structure is designed for actuation unit, which integrates the advantages of two modes (namely, diaphragm type and piston type of the volume changing of pump chamber. In order to improve the static shear yield strength of ERFs, a composite ERFs valve is designed, which adopts the series-parallel plate compound structure. The prototype of the inchworm actuator has been designed and manufactured in the lab. Systematic test results indicate that the displacement resolution of the unconventional inchworm actuator reaches 0.038 μm, and the maximum driving force and velocity are 42 N, 14.8 mm/s, respectively. The optimal working frequency for the maximum driving velocity is 120 Hz. The complete research and development processes further confirm the feasibility of developing a new type of inchworm actuator with high performance based on PZT actuation and ERFs control technology, which provides a reference for the future development of a new type of actuator.

Preparation of PZT thin films on YBCO electrodes by KrF excimer laser ablation technique

International Nuclear Information System (INIS)

Kurogi, H.; Yamagata, Y.; Ebihara, K.

1998-01-01

Pb(Zr X Ti 1-X )O 3 (PZT) films have excellent ferroelectric, optical, piezoelectric, and pyroelectric properties. We prepared PZT thin films by the excimer laser ablation technique. A pulsed KrF excimer laser (Lambda Physik LPX305icc, pulse duration of 25 ns, λ=248 nm, 850 mJ Max.) was used to ablate the bulk targets. We investigated the influence of bottom electrode materials on the characteristics of the PZT thin films prepared on Pt and YBCO underlayers. The X-ray diffraction (XRD) patterns showed that the PZT films prepared with a laser fluence of 2 Jcm -2 on YBCO/MgO(100) substrate at a wide temperature range of 550-680 C have a perovskite (001) structure. At the same laser fluence, the PZT films prepared on Pt/MgO(100) substrate have a perovskite (001) structure only at 650 C. The polarization-electric field (P-E) characteristics and fatigue properties of PZT thin films were measured by the Sawyer-Tower circuit. The remnant polarization and coercive field have been found to be P r =15 μC cm -2 , 30 μC cm -2 and E c =200 kV cm -1 , 100 kV cm -1 for Au/PZT/Pt/MgO and Au/PZT/YBCO/MgO correspondingly. The remnant polarization of Au/PZT/YBCO/MgO thin film was reduced to one-half after about 10 8 cycles of switching. (orig.)

Modeling and Positioning of a PZT Precision Drive System

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Che Liu

2017-11-01

Full Text Available The fact that piezoelectric ceramic transducer (PZT precision drive systems in 3D printing are faced with nonlinear problems with respect to positioning, such as hysteresis and creep, has had an extremely negative impact on the precision of laser focusing systems. To eliminate the impact of PZT nonlinearity during precision drive movement, mathematical modeling and theoretical analyses of each module comprising the system were carried out in this study, a micro-displacement measurement circuit based on Position Sensitive Detector (PSD is constructed, followed by the establishment of system closed-loop control and creep control models. An XL-80 laser interferometer (Renishaw, Wotton-under-Edge, UK was used to measure the performance of the precision drive system, showing that system modeling and control algorithms were correct, with the requirements for precision positioning of the drive system satisfied.

Modeling and Positioning of a PZT Precision Drive System.

Science.gov (United States)

Liu, Che; Guo, Yanling

2017-11-08

The fact that piezoelectric ceramic transducer (PZT) precision drive systems in 3D printing are faced with nonlinear problems with respect to positioning, such as hysteresis and creep, has had an extremely negative impact on the precision of laser focusing systems. To eliminate the impact of PZT nonlinearity during precision drive movement, mathematical modeling and theoretical analyses of each module comprising the system were carried out in this study, a micro-displacement measurement circuit based on Position Sensitive Detector (PSD) is constructed, followed by the establishment of system closed-loop control and creep control models. An XL-80 laser interferometer (Renishaw, Wotton-under-Edge, UK) was used to measure the performance of the precision drive system, showing that system modeling and control algorithms were correct, with the requirements for precision positioning of the drive system satisfied.

The effects of dimensional parameters on sensing and energy harvesting of an embedded PZT in a total knee replacement

Science.gov (United States)

Safaei, Mohsen; Anton, Steven R.

2016-04-01

Total Knee Replacement (TKR), one of the most common surgeries in the United States, is performed when the patient is experiencing significant amounts of pain or when knee functionality has become substantially degraded. Despite impressive recent developments, only about 85% of patients are satisfied with the pain reduction after one year. Therefore, structural health and performance monitoring are integral for intraoperative and postoperative feedback. In extension of the author's previous work, a new configuration for implementation of piezoelectric transducers in total knee replacement bearings is proposed and FEA modeling is performed to attain appropriate sensing and energy harvesting ability. The predicted force transmission ratio to the PZT (ratio of force applied to the bearing to force transferred to the embedded piezoelectric transducer) is about 6.2% compared to about 5% found for the previous encapsulated design. Dimensional parameters of the polyethylene bearing including the diameter and depth of the PZT pocket as well as the placement geometry of the PZT transducer within the bearing are hypothesized as the most influential parameters on the performance of the designed system. The results show a small change of 1% and 2.3% in the output of the system as a result of variation in the PZT location and pocket diameter, respectively. Whereas, the output of the system is significantly sensitive to the pocket depth; a pocket 0.01 mm deeper than the PZT transducer leads to no force transmission, and a pocket 0.15 mm shallower leads to full load transmission to the PZT. In order to develop a self-powered sensor, the amount of energy harvested from tibial forces for the proposed geometry is investigated.

High-Power Characteristics of Thickness Shear Mode for Textured SrBi2Nb2O9 Ceramics

Science.gov (United States)

Ogawa, Hirozumi; Kawada, Shinichiro; Kimura, Masahiko; Higuchi, Yukio; Takagi, Hiroshi

2009-09-01

The high-power piezoelectric characteristics of the thickness shear mode for oriented ceramics of bismuth layer structured ferroelectrics (BLSF), SrBi2Nb2O9 (SBN), were studied by the constant current driving method. These textured ceramics were fabricated by the templated grain growth (TGG) method, and the Lotgering factor was 95%. The vibration of the thickness shear mode in the textured SBN ceramics was stable at the vibration velocity of 2.0 m/s. The resonant frequency was almost constant with increasing vibration velocity in the textured SBN ceramics, however, it decreased with increasing vibration velocity in the randomly oriented SBN ceramics. In the case of Pb(Mn,Nb)O3-Pb(Zr,Ti)O3 ceramics, the vibration velocity of the thickness shear mode was saturated at more than 0.3 m/s, and the resonant frequency decreased at lower vibration velocity than in the case of SBN ceramics. The dissipation power density of the textured SBN ceramics was the lowest among those of the randomly oriented SBN and Pb(Mn,Nb)O3-PZT ceramics. The thickness shear mode of textured SBN ceramics is a good candidate for high-power piezoelectric applications.

Fabrication and energy harvesting characteristics of unimorph piezoelectric cantilever generators with interdigitated electrode lead zirconate titanate laminates

Science.gov (United States)

Lee, Min-seon; Yun, Ji-sun; Park, Woon-ik; Hong, Youn-woo; Cho, Jeong-ho; Paik, Jong-hoo; Park, Yong Ho; Son, Chun-myung; Jeong, Young Hun

2017-12-01

Interdigitated electrode (IDE) unimorph piezoelectric cantilever generators (UPCGs) were fabricated and their energy harvesting characteristics were investigated. A hard lead zirconate titanate (PZT) material with a high mechanical quality factor (Q m) of 1280 was used for the active piezoelectric film of the IDE UPCGs. Two different laminated IDE UPCGs were prepared; one has Ag/Pd interdigitated electrode (IDE) formed only on the top and bottom PZT sheets (D-IDE), while the other has Ag/Pd IDE on all of the PZT sheets (M-IDE). Cofiring was conducted at 1050 °C for 2 h for PZT laminates with IDEs. The fabricated IDE UPCGs exhibited power densities of 50.4 µW/cm3 for the D-IDE and 820 µW/cm3 for the M-IDE. The UPCG with the M-IDE exhibited a higher performance than that with the D-IDE. Specifically, a significantly enhanced normalized power factor of 670 µW/(g2·cm3) was found at 118 Hz across 100 kΩ.

Ferroelectric and piezoelectric responses of (110) and (001)-oriented epitaxial Pb(Zr{sub 0.52}Ti{sub 0.48})O{sub 3} thin films on all-oxide layers buffered silicon

Energy Technology Data Exchange (ETDEWEB)

Vu, Hien Thu [International Training Institute for Materials Science (ITIMS), Hanoi University of Science and Technology, No.1 Dai Co Viet Road, Hanoi 10000 (Viet Nam); Nguyen, Minh Duc, E-mail: minh.nguyen@itims.edu.vn [International Training Institute for Materials Science (ITIMS), Hanoi University of Science and Technology, No.1 Dai Co Viet Road, Hanoi 10000 (Viet Nam); Inorganic Materials Science (IMS), MESA + Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede (Netherlands); SolMateS B.V., Drienerlolaan 5, Building 6, 7522 NB Enschede (Netherlands); Houwman, Evert; Boota, Muhammad [Inorganic Materials Science (IMS), MESA + Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede (Netherlands); Dekkers, Matthijn [SolMateS B.V., Drienerlolaan 5, Building 6, 7522 NB Enschede (Netherlands); Vu, Hung Ngoc [International Training Institute for Materials Science (ITIMS), Hanoi University of Science and Technology, No.1 Dai Co Viet Road, Hanoi 10000 (Viet Nam); Rijnders, Guus [Inorganic Materials Science (IMS), MESA + Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede (Netherlands)

2015-12-15

Graphical abstract: The cross sections show a very dense structure in the (001)-oriented films (c,d), while an open columnar growth structure is observed in the case of the (110)-oriented films (a,b). The (110)-oriented PZT films show a significantly larger longitudinal piezoelectric coefficient (d33{sub ,f}), but smaller transverse piezoelectric coefficient (d31{sub ,f}) than the (001) oriented films. - Highlights: • We fabricate all-oxide, epitaxial piezoelectric PZT thin films on Si. • The orientation of the films can be controlled by changing the buffer layer stack. • The coherence of the in-plane orientation of the grains and grain boundaries affects the ferroelectric properties. • Good cycling stability of the ferroelectric properties of (001)-oriented PZT thin films. The (110)-oriented PZT thin films show a larger d33{sub ,f} but smaller d31{sub ,f} than the (001)-oriented films. - Abstract: Epitaxial ferroelectric Pb(Zr{sub 0.52}Ti{sub 0.48})O{sub 3} (PZT) thin films were fabricated on silicon substrates using pulsed laser deposition. Depending on the buffer layers and perovskite oxide electrodes, epitaxial films with different orientations were grown. (110)-oriented PZT/SrRuO{sub 3} (and PZT/LaNiO{sub 3}) films were obtained on YSZ-buffered Si substrates, while (001)-oriented PZT/SrRuO{sub 3} (and PZT/LaNiO{sub 3}) were fabricated with an extra CeO{sub 2} buffer layer (CeO{sub 2}/YSZ/Si). There is no effect of the electrode material on the properties of the films. The initial remnant polarizations in the (001)-oriented films are higher than those of (110)-oriented films, but it increases to the value of the (001) films upon cycling. The longitudinal piezoelectric d33{sub ,f} coefficients of the (110) films are larger than those of the (001) films, whereas the transverse piezoelectric d31{sub ,f} coefficients in the (110)-films are less than those in the (001)-oriented films. The difference is ascribed to the lower density (connectivity between

Flexible Pb(Zr0.52Ti0.48)O3 Films for a Hybrid Piezoelectric-Pyroelectric Nanogenerator under Harsh Environments.

Science.gov (United States)

Ko, Young Joon; Kim, Dong Yeong; Won, Sung Sik; Ahn, Chang Won; Kim, Ill Won; Kingon, Angus I; Kim, Seung-Hyun; Ko, Jae-Hyeon; Jung, Jong Hoon

2016-03-01

In spite of extremely high piezoelectric and pyroelectric coefficients, there are few reports on flexible ferroelectric perovskite film based nanogenerators (NGs). Here, we report the successful growth of a flexible Pb(Zr0.52Ti0.48)O3 (PZT) film and its application to hybrid piezoelectric-pyroelectric NG. A highly flexible Ni-Cr metal foil substrate with a conductive LaNiO3 bottom electrode enables the growth of flexible PZT film having high piezoelectric (140 pC/N) and pyroelectric (50 nC/cm(2)K) coefficients at room temperature. The flexible PZT-based NG effectively scavenges mechanical vibration and thermal fluctuation from sources ranging from the human body to the surroundings such as wind. Furthermore, it stably generates electric current even at elevated temperatures of 100 °C, relative humidity of 70%, and pH of 13 by virtue of its high Curie temperature and strong resistance for water and base. As proof of power generation under harsh environments, we demonstrate the generation of extremely high current at the exhaust pipe of a car, where hot CO and CO2 gases are rapidly expelled to air. This work expands the application of flexible PZT film-based NG for the scavenging mechanical vibration and thermal fluctuation energies even at extreme conditions.

A measurement method for piezoelectric material properties under longitudinal compressive stress–-a compression test method for thin piezoelectric materials

International Nuclear Information System (INIS)

Kang, Lae-Hyong; Lee, Dae-Oen; Han, Jae-Hung

2011-01-01

We introduce a new compression test method for piezoelectric materials to investigate changes in piezoelectric properties under the compressive stress condition. Until now, compression tests of piezoelectric materials have been generally conducted using bulky piezoelectric ceramics and pressure block. The conventional method using the pressure block for thin piezoelectric patches, which are used in unimorph or bimorph actuators, is prone to unwanted bending and buckling. In addition, due to the constrained boundaries at both ends, the observed piezoelectric behavior contains boundary effects. In order to avoid these problems, the proposed method employs two guide plates with initial longitudinal tensile stress. By removing the tensile stress after bonding a piezoelectric material between the guide layers, longitudinal compressive stress is induced in the piezoelectric layer. Using the compression test specimens, two important properties, which govern the actuation performance of the piezoelectric material, the piezoelectric strain coefficients and the elastic modulus, are measured to evaluate the effects of applied electric fields and re-poling. The results show that the piezoelectric strain coefficient d 31 increases and the elastic modulus decreases when high voltage is applied to PZT5A, and the compression in the longitudinal direction decreases the piezoelectric strain coefficient d 31 but does not affect the elastic modulus. We also found that the re-poling of the piezoelectric material increases the elastic modulus, but the piezoelectric strain coefficient d 31 is not changed much (slightly increased) by re-poling

Preparation of PZT thin films on YBCO electrodes by KrF excimer laser ablation technique

Energy Technology Data Exchange (ETDEWEB)

Kurogi, H; Yamagata, Y; Ebihara, K [Kumamoto Univ. (Japan). Dept. of Electr. Eng. and Comput. Sci.; Inoue, N [Kyushu Electric Power Co., Inc., Suizenji, 1-6-36, Kumamoto 862 (Japan)

1998-03-01

Pb(Zr{sub X}Ti{sub 1-X})O{sub 3} (PZT) films have excellent ferroelectric, optical, piezoelectric, and pyroelectric properties. We prepared PZT thin films by the excimer laser ablation technique. A pulsed KrF excimer laser (Lambda Physik LPX305icc, pulse duration of 25 ns, {lambda}=248 nm, 850 mJ Max.) was used to ablate the bulk targets. We investigated the influence of bottom electrode materials on the characteristics of the PZT thin films prepared on Pt and YBCO underlayers. The X-ray diffraction (XRD) patterns showed that the PZT films prepared with a laser fluence of 2 Jcm{sup -2} on YBCO/MgO(100) substrate at a wide temperature range of 550-680 C have a perovskite (001) structure. At the same laser fluence, the PZT films prepared on Pt/MgO(100) substrate have a perovskite (001) structure only at 650 C. The polarization-electric field (P-E) characteristics and fatigue properties of PZT thin films were measured by the Sawyer-Tower circuit. The remnant polarization and coercive field have been found to be P{sub r}=15 {mu}C cm{sup -2}, 30 {mu}C cm{sup -2} and E{sub c}=200 kV cm{sup -1}, 100 kV cm{sup -1} for Au/PZT/Pt/MgO and Au/PZT/YBCO/MgO correspondingly. The remnant polarization of Au/PZT/YBCO/MgO thin film was reduced to one-half after about 10{sup 8} cycles of switching. (orig.) 7 refs.

Effect of Nb doping on sintering and dielectric properties of PZT ceramics

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Ali Mirzaei

2016-09-01

Full Text Available The extensive use of piezoelectric ceramics such as lead zirconate titanate (PZT in different applications became possible with the development of donor or acceptor dopants. Therefore, studies on the effect of dopants on the properties of PZT ceramics are highly demanded. In this study undoped and 2.4 mol% Nb-doped PZT (PZTN powders were successfully obtained by a solid-state reaction and calcination at 850 °C for 2 h. Crystallinity and phase formation of the prepared powders were studied using X-ray diffraction (XRD. In order to study morphology of powders, scanning electron microscopy (SEM was performed. The crystalline PZT and Nb-doped PZT powders were pelleted into discs and sintered at 1100, 1150 and 1200 °C, with a heating rate of 10 °C/min, and holding time of 1–6 h to find the optimum combination of temperature and time to produce high density ceramics. Microstructural characterization was conducted on the fractured ceramic surfaces using SEM. Density measurements showed that maximal density of 95% of the theoretical density was achieved after sintering of PZT and PZTN ceramics at 1200 °C for 2 h and 4 h, respectively. However, the results of dielectric measurements showed that PZTN ceramics have higher relative permittivity (εr ∼17960 with lower Curie temperature (∼358 °C relative to PZT (εr = 16000 at ∼363 °C as a result of fine PZTN structure as well as presence of vacancies. In addition, dielectric loss (at 1 kHz of PZT and PZTN ceramics with 95% theoretical density was 0.0087 and 0.02, respectively. The higher dielectric loss in PZTN was due to easier domain wall motions in PZTN ceramics.

Niobium effect on the Pzt ceramic properties; Efeito do niobio sobre as propriedades da ceramica PZT

Energy Technology Data Exchange (ETDEWEB)

Gimenes, R.; Zaguete, M.A.; Varela, J.A.; Cilense, M.; Paiva-Santos, C.O.; Las, W.C. [UNESP, Araraquara, SP (Brazil). Inst. de Quimica

1996-12-31

Lead zirconate titanate, PZT, was prepared with Zr/Ti ratio of 50/50. The powder was prepared by the Pechini method with addition of 0,3; 0,5 e 0,7 mol % of Nb{sup +5} ions. The precursors obtained were calcined at 700 deg C for 3 hs and milled with zirconia balls in a medium of isopropilic alcohol for 6 hs. The powders were characterized by XRD. For the sintering studies powders were isostatically pressed (230 MPa) into pellets and which were put inside a box furnace at 1200 deg C for 2 hs and 1100 deg C for 4 hs in a closed system containing 5 % of atmospheric powder (Pb Zr O{sub 3} + 5% Pb O) relative to all pellets`mass. It was verified that the best densification rate was obtained for PZT with addition of 0,5 mol % of Nb{sup +5} ions and sintered at 1100 deg C for 4 hs. Sintered samples at 1100 deg C for 4 hs were characterized as to dielectric (k, P{sub r} and E{sub c}) and piezoelectric properties. (author) 5 refs., 2 figs., 3 tabs.

Modeling and Analysis of a Bimorph PZT Cantilever Beam Based Micropower Generator

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Jyoti AJITSARIA

2009-06-01

Full Text Available Recent developments in miniaturized sensors, digital processors and wireless communication systems have many desirable applications. The realization of these applications however, is limited by the lack of a similarly sized power source. One method of power harvesting is the use of piezoelectric materials (PZT, which form transducers that are able to interchange electrical energy and mechanical vibration. Many proposed power generation systems employ a piezoelectric component to convert the mechanical energy to electrical energy. In this paper, a formulation of mathematical model is developed that predicts the power conversion for a device that contains a piezoelectric component. Analysis is also done with AC/DC power conversion using a bridge rectifier circuit. Finally, the verification of the models is performed experimentally and comparison has been made with the simulation results. The comparison of simulation results coincide with experimental data quite well.

Development of PZT-excited stroboscopic shearography for full-field nondestructive evaluation.

Science.gov (United States)

Asemani, Hamidreza; Park, Jinwoo; Lee, Jung-Ryul; Soltani, Nasser

2017-05-01

Nondestructive evaluation using shearography requires a way to stress the inspection target. This technique is able to directly measure the displacement gradient distribution on the object surface. Shearography visualizes the internal structural damages as the anomalous pattern in the shearograpic fringe pattern. A piezoelectric (PZT) excitation system is able to generate loadings in the vibrational, acoustic, and ultrasonic regimes. In this paper, we propose a PZT-excited stroboscopic shearography. The PZT excitation could generate vibrational loading, a stationary wavefield, and a nonstationary propagation wave to fulfill the external loading requirement of shearography. The sweeping of the PZT excitation frequency, the formation of a standing wave, and a small shearing to suppress the incident wave were powerful controllable tools to detect the defects. The sweeping of the PZT excitation frequency enabled us to determine one of the defect-sensitive frequencies almost in real time. In addition, because the defect sensitive frequencies always existed in wide and plural ranges, the risk of the defect being overlooked by the inspector could be alleviated. The results of evaluation using stroboscopic shearography showed that an artificial 20 mm-diameter defect could be visualized at the excitation frequencies of 5-8 kHz range and 12.5-15.5 kHz range. This technique provided full field reliable and repeatable inspection results. Additionally, the proposed method overcame the important drawback of the time-averaged shearography, being required to identify the resonance vibration frequency sensitive to the defect.

The development of a PZT-based microdrive for neural signal recording

International Nuclear Information System (INIS)

Park, Sangkyu; Yoon, Euisung; Park, Sukho; Lee, Sukchan; Shin, Hee-sup; Park, Hyunjun; Kim, Byungkyu; Kim, Daesoo; Park, Jongoh

2008-01-01

A hand-controlled microdrive has been used to obtain neural signals from rodents such as rats and mice. However, it places severe physical stress on the rodents during its manipulation, and this stress leads to alertness in the mice and low efficiency in obtaining neural signals from the mice. To overcome this issue, we developed a novel microdrive, which allows one to adjust the electrodes by a piezoelectric device (PZT) with high precision. Its mass is light enough to install on the mouse's head. The proposed microdrive has three H-type PZT actuators and their guiding structure. The operation principle of the microdrive is based on the well known inchworm mechanism. When the three PZT actuators are synchronized, linear motion of the electrode is produced along the guiding structure. The electrodes used for the recording of the neural signals from neuron cells were fixed at one of the PZT actuators. Our proposed microdrive has an accuracy of about 400 nm and a long stroke of about 5 mm. In response to formalin-induced pain, single unit activities are robustly measured at the thalamus with electrodes whose vertical depth is adjusted by the microdrive under urethane anesthesia. In addition, the microdrive was efficient in detecting neural signals from mice that were moving freely. Thus, the present study suggests that the PZT-based microdrive could be an alternative for the efficient detection of neural signals from mice during behavioral states without any stress to the mice. (technical note)

Superior piezoelectric composite films: taking advantage of carbon nanomaterials.

Science.gov (United States)

Saber, Nasser; Araby, Sherif; Meng, Qingshi; Hsu, Hung-Yao; Yan, Cheng; Azari, Sara; Lee, Sang-Heon; Xu, Yanan; Ma, Jun; Yu, Sirong

2014-01-31

Piezoelectric composites comprising an active phase of ferroelectric ceramic and a polymer matrix have recently found numerous sensory applications. However, it remains a major challenge to further improve their electromechanical response for advanced applications such as precision control and monitoring systems. We here investigated the incorporation of graphene platelets (GnPs) and multi-walled carbon nanotubes (MWNTs), each with various weight fractions, into PZT (lead zirconate titanate)/epoxy composites to produce three-phase nanocomposites. The nanocomposite films show markedly improved piezoelectric coefficients and electromechanical responses (50%) besides an enhancement of ~200% in stiffness. The carbon nanomaterials strengthened the impact of electric field on the PZT particles by appropriately raising the electrical conductivity of the epoxy. GnPs have been proved to be far more promising in improving the poling behavior and dynamic response than MWNTs. The superior dynamic sensitivity of GnP-reinforced composite may be caused by the GnPs' high load transfer efficiency arising from their two-dimensional geometry and good compatibility with the matrix. The reduced acoustic impedance mismatch resulting from the improved thermal conductance may also contribute to the higher sensitivity of GnP-reinforced composite. This research pointed out the potential of employing GnPs to develop highly sensitive piezoelectric composites for sensing applications.

Superior piezoelectric composite films: taking advantage of carbon nanomaterials

International Nuclear Information System (INIS)

Saber, Nasser; Araby, Sherif; Meng, Qingshi; Hsu, Hung-Yao; Lee, Sang-Heon; Ma, Jun; Yan, Cheng; Xu, Yanan; Azari, Sara; Yu, Sirong

2014-01-01

Piezoelectric composites comprising an active phase of ferroelectric ceramic and a polymer matrix have recently found numerous sensory applications. However, it remains a major challenge to further improve their electromechanical response for advanced applications such as precision control and monitoring systems. We here investigated the incorporation of graphene platelets (GnPs) and multi-walled carbon nanotubes (MWNTs), each with various weight fractions, into PZT (lead zirconate titanate)/epoxy composites to produce three-phase nanocomposites. The nanocomposite films show markedly improved piezoelectric coefficients and electromechanical responses (50%) besides an enhancement of ∼200% in stiffness. The carbon nanomaterials strengthened the impact of electric field on the PZT particles by appropriately raising the electrical conductivity of the epoxy. GnPs have been proved to be far more promising in improving the poling behavior and dynamic response than MWNTs. The superior dynamic sensitivity of GnP-reinforced composite may be caused by the GnPs’ high load transfer efficiency arising from their two-dimensional geometry and good compatibility with the matrix. The reduced acoustic impedance mismatch resulting from the improved thermal conductance may also contribute to the higher sensitivity of GnP-reinforced composite. This research pointed out the potential of employing GnPs to develop highly sensitive piezoelectric composites for sensing applications. (paper)

Electroactive properties of flexible piezoelectric composites

Directory of Open Access Journals (Sweden)

Sakamoto Walter Katsumi

2001-01-01

Full Text Available A flexible piezoelectric composite with 0-3 connectivity, made from Lead Zirconate Titanate (PZT powder and vegetable-based polyurethane (PU, was doped with small amount of semiconductor powder. As a result a composite with 0-0-3 connectivity was obtained. The nature of absorption and steady state electrical conduction and the dielectric behaviour have been studied for this ceramic/polymer composite. The dielectric loss processes of the composite were observed to be dominated by those the polymer. Adding a semiconductor phase in the composite the electrical conductivity can be controlled and a continuous electric flux path could be created between the PZT grains. This composite may be poled at low voltage and in shorter time compared with composites without a conductive phase.

Characteristic Analysis and Simulated Test of Hybrid Bearing with the Introduction of Piezoelectric Controller

Directory of Open Access Journals (Sweden)

Runlin Chen

2016-01-01

Full Text Available A novel hybrid bearing with the introduction of piezoelectric controller and tilting pads to control vibration actively is proposed in this paper, and the feasibility of this scheme is verified by theoretical calculation and experimental data. This scheme can control the vibration of bearing actively by using the electromechanical characteristics of piezoelectric ceramic transducer (PZT components. The static internal character of PZT and static external characteristic of piezoelectric control component are analyzed, and the calculation equations of preload coefficient and driving force of the new bearing are given. The simulation setup of the new bearing is designed and developed. The data representing the relationship of displacement of pad pivot, driving force, voltage, and the simulation stiffness of liquid film are obtained in the test, and the feature parameters of piezoelectric control component are amended to analyze the relationship between preload coefficient of the bearing and driving voltage. The proposed new bearing has the function of controlling preload actively. The theoretical and experimental research results provide essential guidance for the detail design of this new bearing and also provide a new idea for the vibration control of high speed rotor systems.

Pressure tuning of the morphotropic phase boundary in piezoelectric lead zirconate titanate

International Nuclear Information System (INIS)

Rouquette, J.; Haines, J.; Bornand, V.; Pintard, M.; Papet, Ph.; Bousquet, C.; Konczewicz, L.; Gorelli, F. A.; Hull, S.

2004-01-01

Titanium-rich PZT solid solutions were studied under high pressure by neutron and x-ray diffraction, Raman spectroscopy and dielectric measurements. The results show that high pressure stabilizes the ferroelectric monoclinic phases, which are proposed to be responsible for the high piezoelectric properties characteristic of the morphotropic composition PbZr 0.52 Ti 0.48 O 3 . Pressure may thus be used to tune the morphotropic phase boundary in the composition-pressure plane to include a wide range of titanium-rich PZT compositions

Microwave hydrothermal synthesis and characterization of PZT 52/48 powders

International Nuclear Information System (INIS)

Teixeira, G.F.; Gasparotto, G.; Santos, N.A.; Zaghete, M.A.; Varela, J.A.; Longo, E.

2009-01-01

Full text: Lead Zirconate Titanate (PZT) is a ceramic witch has great interest because of their ferroelectric, piezoelectric, and other electrical properties. In this work Pb(ZrxTi1-x)O3 powders were synthesized by microwave hydrothermal synthesis (M-H) at 180°C without excess lead content. This method allows obtaining particles whit nanometer size, good stoichiometric controls, high purity and crystalline degree at low temperatures and short times of synthesis. Powders were synthesized with molar concentration of 0.15 mol.L -1 during different times: 30 min, 2, 4, 6 and 8 h. After that the powders were characterized by X-ray diffraction (XRD), Field Emission Gun (FEG) and photoluminescence (PL). Through analysis it is observed that the crystalline phase of PZT is obtained from 2 hours of synthesis and this same time also presents more intense PL emission. (author)

Effect of material constants on power output in piezoelectric vibration-based generators.

Science.gov (United States)

Takeda, Hiroaki; Mihara, Kensuke; Yoshimura, Tomohiro; Hoshina, Takuya; Tsurumi, Takaaki

2011-09-01

A possible power output estimation based on material constants in piezoelectric vibration-based generators is proposed. A modified equivalent circuit model of the generator was built and was validated by the measurement results in the generator fabricated using potassium sodium niobate-based and lead zirconate titanate (PZT) ceramics. Subsequently, generators with the same structure using other PZT-based and bismuth-layered structure ferroelectrics ceramics were fabricated and tested. The power outputs of these generators were expressed as a linear functions of the term composed of electromechanical coupling coefficients k(sys)(2) and mechanical quality factors Q*(m) of the generator. The relationship between device constants (k(sys)(2) and Q*(m)) and material constants (k(31)(2) and Q(m)) was clarified. Estimation of the power output using material constants is demonstrated and the appropriate piezoelectric material for the generator is suggested.

Niobium effect on the Pzt ceramic properties

International Nuclear Information System (INIS)

Gimenes, R.; Zaguete, M.A.; Varela, J.A.; Cilense, M.; Paiva-Santos, C.O.; Las, W.C.

1996-01-01

Lead zirconate titanate, PZT, was prepared with Zr/Ti ratio of 50/50. The powder was prepared by the Pechini method with addition of 0,3; 0,5 e 0,7 mol % of Nb +5 ions. The precursors obtained were calcined at 700 deg C for 3 hs and milled with zirconia balls in a medium of isopropilic alcohol for 6 hs. The powders were characterized by XRD. For the sintering studies powders were isostatically pressed (230 MPa) into pellets and which were put inside a box furnace at 1200 deg C for 2 hs and 1100 deg C for 4 hs in a closed system containing 5 % of atmospheric powder (Pb Zr O 3 + 5% Pb O) relative to all pellets'mass. It was verified that the best densification rate was obtained for PZT with addition of 0,5 mol % of Nb +5 ions and sintered at 1100 deg C for 4 hs. Sintered samples at 1100 deg C for 4 hs were characterized as to dielectric (k, P r and E c ) and piezoelectric properties. (author)

Research on Effective Electric-Mechanical Coupling Coefficient of Sandwich Type Piezoelectric Ultrasonic Transducer Using Bending Vibration Mode

Directory of Open Access Journals (Sweden)

Qiang Zhang

2015-01-01

Full Text Available An analytical model on electromechanical coupling coefficient and the length optimization of a bending piezoelectric ultrasonic transducer are proposed. The piezoelectric transducer consists of 8 PZT elements sandwiched between four thin electrodes, and the PZT elements are clamped by a screwed connection between fore beam and back beam. Firstly, bending vibration model of the piezoelectric transducer is built based on the Timoshenko beam theory. Secondly, the analytical model of effective electromechanical coupling coefficient is built based on the bending vibration model. Energy method and electromechanical equivalent circuit method are involved in the modelling process. To validate the analytical model, sandwich type piezoelectric transducer example in second order bending vibration mode is analysed. Effective electromechanical coupling coefficient of the transducer is optimized with simplex reflection technique, and the optimized ratio of length of the transducers is obtained. Finally, experimental prototypes of the sandwich type piezoelectric transducers are fabricated. Bending vibration mode and impedance of the experimental prototypes are tested, and electromechanical coupling coefficient is obtained according to the testing results. Results show that the analytical model is in good agreement with the experimental model.

Quantitative comparison of PZT and CMUT probes for photoacoustic imaging: Experimental validation.

Science.gov (United States)

Vallet, Maëva; Varray, François; Boutet, Jérôme; Dinten, Jean-Marc; Caliano, Giosuè; Savoia, Alessandro Stuart; Vray, Didier

2017-12-01

Photoacoustic (PA) signals are short ultrasound (US) pulses typically characterized by a single-cycle shape, often referred to as N-shape. The spectral content of such wideband signals ranges from a few hundred kilohertz to several tens of megahertz. Typical reception frequency responses of classical piezoelectric US imaging transducers, based on PZT technology, are not sufficiently broadband to fully preserve the entire information contained in PA signals, which are then filtered, thus limiting PA imaging performance. Capacitive micromachined ultrasonic transducers (CMUT) are rapidly emerging as a valid alternative to conventional PZT transducers in several medical ultrasound imaging applications. As compared to PZT transducers, CMUTs exhibit both higher sensitivity and significantly broader frequency response in reception, making their use attractive in PA imaging applications. This paper explores the advantages of the CMUT larger bandwidth in PA imaging by carrying out an experimental comparative study using various CMUT and PZT probes from different research laboratories and manufacturers. PA acquisitions are performed on a suture wire and on several home-made bimodal phantoms with both PZT and CMUT probes. Three criteria, based on the evaluation of pure receive impulse response, signal-to-noise ratio (SNR) and contrast-to-noise ratio (CNR) respectively, have been used for a quantitative comparison of imaging results. The measured fractional bandwidths of the CMUT arrays are larger compared to PZT probes. Moreover, both SNR and CNR are enhanced by at least 6 dB with CMUT technology. This work highlights the potential of CMUT technology for PA imaging through qualitative and quantitative parameters.

Quantitative measurement of piezoelectric coefficient of thin film using a scanning evanescent microwave microscope.

Science.gov (United States)

Zhao, Zhenli; Luo, Zhenlin; Liu, Chihui; Wu, Wenbin; Gao, Chen; Lu, Yalin

2008-06-01

This article describes a new approach to quantitatively measure the piezoelectric coefficients of thin films at the microscopic level using a scanning evanescent microwave microscope. This technique can resolve 10 pm deformation caused by the piezoelectric effect and has the advantages of high scanning speed, large scanning area, submicron spatial resolution, and a simultaneous accessibility to many other related properties. Results from the test measurements on the longitudinal piezoelectric coefficient of PZT thin film agree well with those from other techniques listed in literatures.

Soft pneumatic actuator skin with piezoelectric sensors for vibrotactile feedback

Directory of Open Access Journals (Sweden)

Harshal Arun Sonar

2016-01-01

Full Text Available The latest wearable technologies demand more intuitive and sophisticated interfaces for communication, sensing, and feedback closer to the body. Evidently, such interfaces require flexibility and conformity without losing their functionality even on rigid surfaces. Although there has been various research efforts in creating tactile feedback to improve various haptic interfaces and master-slave manipulators, we are yet to see a comprehensive device that can both supply vibratory actuation and tactile sensing. This paper describes a soft pneumatic actuator (SPA based, SPA-skin prototype that allows bidirectional tactile information transfer to facilitate simpler and responsive wearable interface. We describe the design and fabrication of a 1.4 mm-thick vibratory SPA - skin that is integrated with piezoelectric sensors. We examine in detail the mechanical performance compared to the SPA model and the sensitivity of the sensors for the application in vibrotactile feedback. Experimental findings show that this ultra-thin SPA and the unique integration process of the discrete lead zirconate titanate (PZT based piezoelectric sensors achieve high resolution of soft contact sensing as well as accurate control on vibrotactile feedback by closing the control loop.

A Piezoelectric Micromotor with a Stator of φ=1.6 mm and l=4 mm Using Bulk PZT

Science.gov (United States)

Cagatay, Serra; Koc, Burhanettin; Moses, Paul; Uchino, Kenji

2004-04-01

The smallest discrete piezoelectric ultrasonic motor using bulk ceramics was developed. We are proposing basically a two-part motor: stator and rotor. The stator of the present motor consists of a hollow metal brass tube with outer diameter of 1.6 mm, inner diameter of 0.8 mm and length of only 4 mm with 2 PZT plates bonded onto it. Owing to the asymmetrical stator surface, two degenerated orthogonal bending modes were slightly split, resulting in a wobbling motion. Thus, the motor can be driven by a single driving source. The rotor is a spring, which is basically different from previous designs, pressed at both ends to the stator by a pair of ferrules. Consequently, the length of the whole motor assembly was reduced significantly; a final motor length of only 5 mm was obtained. The working frequency under zero load was approximately 227-233 kHz. Although the size is small, relatively high power was obtained under an optimized load condition: torque of 0.06 mNm, maximum power of 3.2 mW with a speed of 118 rad/s, and maximum efficiency of 11% under 48 Vrms at 221 kHz.

Experimental and analytical parametric study of single-crystal unimorph beams for vibration energy harvesting.

Science.gov (United States)

Karami, M Amin; Bilgen, Onur; Inman, Daniel J; Friswell, Michael I

2011-07-01

This research presents an experimental and theoretical energy harvesting characterization of beam-like, uniform cross-section, unimorph structures employing single-crystal piezoelectrics. Different piezoelectric materials, substrates, and configurations are examined to identify the best design configuration for lightweight energy harvesting devices for low-power applications. Three types of piezoelectrics (singlecrystal PMN-PZT, polycrystalline PZT-5A, and PZT-5H-type monolithic ceramics) are evaluated in a unimorph cantilevered beam configuration. The devices have been excited by harmonic base acceleration. All of the experimental characteristics have been used to validate an exact electromechanical model of the harvester. The study shows the optimum choice of substrate material for single-crystal piezoelectric energy harvesting. Comparison of energy scavengers with stainless steel substrates reveals that single-crystal harvesters produce superior power compared with polycrystalline devices. To further optimize the power harvesting, we study the relation between the thickness of the substrate and the power output for different substrate materials. The relation between power and substrate thickness profoundly varies among different substrate materials. The variation is understood by examining the change of mechanical transmissibility and the variations of the coupling figure of merit of the harvesters with thickness ratio. The investigation identifies the optimal thickness of the substrate for different substrate materials. The study also shows that the densities of the substrates and their mechanical damping coefficients have significant effects on the power output.

Strong piezoelectric anisotropy d15/d33 in ⟨111⟩ textured Pb(Mg1/3Nb2/3)O3-Pb(Zr,Ti)O3 ceramics

Science.gov (United States)

Yan, Yongke; Priya, Shashank

2015-08-01

The shear mode piezoelectric properties of Pb(Mg1/3Nb2/3)O3-Pb(Zr,Ti)O3 (PMN-PZT) ceramic with 72% ⟨111⟩ texture were investigated. The piezoelectric anisotropic factor d15/d33 was as high as 8.5 in ⟨111⟩ textured ceramic as compared to 2.0 in random counterpart. The high d15/d33 indicates the "rotator" ferroelectric characteristics of PMN-PZT system and suggests that the large shear piezoelectric response contributes towards the high longitudinal piezoelectric response (d33) in non-polar direction (d33 = 1100 pC/N in ⟨001⟩ textured ceramic vs. d33 = 112 pC/N in ⟨111⟩ textured ceramic).

Ferroelectric capped magnetization in multiferroic PZT/LSMO tunnel junctions

Energy Technology Data Exchange (ETDEWEB)

Kumar, Ashok, E-mail: ashok553@nplindia.org; Shukla, A. K. [National Physical Laboratory (CSIR), Dr. K. S. Krishnan Road, New Delhi-110012 (India); Barrionuevo, D.; Ortega, N.; Katiyar, Ram S. [Department of Physics and Institute of Functional Nanomaterials, University of Puerto Rico, San Juan, Puerto Rico 00931-3343 (United States); Shannigrahi, Santiranjan [Institute of Materials Research and Engineering - IMRE, Agency for Science Technology and Research (A-STAR), 3 Research Link, Singapore 117602 (Singapore); Scott, J. F. [Department of Chemistry and Department of Physics, University of St. Andrews, St. Andrews KY16 ST (United Kingdom)

2015-03-30

Self-poled ultra-thin ferroelectric PbZr{sub 0.52}Ti{sub 0.48}O{sub 3} (PZT) (5 and 7 nm) films have been grown by pulsed laser deposition technique on ferromagnetic La{sub 0.67}Sr{sub 0.33}MnO{sub 3} (LSMO) (30 nm) to check the effect of polar capping on magnetization for ferroelectric tunnel junction devices. PZT/LSMO heterostructures with thick polar PZT (7 nm) capping show nearly 100% enhancement in magnetization compared with thin polar PZT (5 nm) films, probably due to excess hole transfer from the ferroelectric to the ferromagnetic layers. Core-level x-ray photoelectron spectroscopy studies revealed the presence of larger Mn 3s exchange splitting and higher Mn{sup 3+}/Mn{sup 4+} ion ratio in the LSMO with 7 nm polar capping.

Bending-induced electromechanical coupling and large piezoelectric response in a micromachined diaphragm

KAUST Repository

Wang, Zhihong; Yao, Yingbang; Wang, Xianbin; Yue, Weisheng; Chen, Longqing; Zhang, Xixiang

2013-01-01

We investigated the dependence of electromechanical coupling and the piezoelectric response of a micromachined Pb(Zr 0.52 Ti 0.48)O 3 (PZT) diaphragm on its curvature by observing the impedance spectrum and central deflection responses to a small AC

A review of piezoelectric polymers as functional materials for electromechanical transducers

International Nuclear Information System (INIS)

Ramadan, Khaled S; Evoy, S; Sameoto, D

2014-01-01

Polymer based MEMS and microfluidic devices have the advantages of mechanical flexibility, lower fabrication cost and faster processing over silicon based ones. Also, many polymer materials are considered biocompatible and can be used in biological applications. A valuable class of polymers for microfabricated devices is piezoelectric functional polymers. In addition to the normal advantages of polymers, piezoelectric polymers can be directly used as an active material in different transduction applications. This paper gives an overview of piezoelectric polymers based on their operating principle. This includes three main categories: bulk piezoelectric polymers, piezocomposites and voided charged polymers. State-of-the-art piezopolymers of each category are presented with a focus on fabrication techniques and material properties. A comparison between the different piezoelectric polymers and common inorganic piezoelectric materials (PZT, ZnO, AlN and PMN–PT) is also provided in terms of piezoelectric properties. The use of piezopolymers in different electromechanical devices is also presented. This includes tactile sensors, energy harvesters, acoustic transducers and inertial sensors. (topical review)

Piezoelectric evaluation of ion beam etched Pb(Zr,Ti)O3 thin films by piezoresponse force microscopy

International Nuclear Information System (INIS)

Legrand, C.; Da Costa, A.; Desfeux, R.; Soyer, C.; Remiens, D.

2007-01-01

The evolution of piezoelectric properties of Pb(Zr,Ti)O 3 (PZT) thin films after ion beam etching have been investigated at the nanoscale level by piezoelectric force microscopy. A comparison of the piezoelectric properties on etched and unetched films is realized. Piezoelectric contrasts imaging evidences a modification of the domain architecture at the film surface. Local piezoelectric hysteresis loops measurements on grains indicate that the coercive voltage for switching is much higher for the etched films (2.3 V) compared to the unetched ones (1.0 V) while the average piezoelectric activity is slightly lower. The results are explained in terms of grain-damaging during etching and domain-wall pinning

Piezoelectric and Magnetoelectric Thick Films for Fabricating Power Sources in Wireless Sensor Nodes

Directory of Open Access Journals (Sweden)

Jong-Jin Choi

2009-08-01

Full Text Available In this manuscript, we review the progress made in the synthesis of thick film-based piezoelectric and magnetoelectric structures for harvesting energy from mechanical vibrations and magnetic field. Piezoelectric compositions in the system Pb(Zr,TiO3–Pb(Zn1/3Nb2/3O3 (PZNT have shown promise for providing enhanced efficiency due to higher energy density and thus form the base of transducers designed for capturing the mechanical energy. Laminate structures of PZNT with magnetostrictive ferrite materials provide large magnitudes of magnetoelectric coupling and are being targeted to capture the stray magnetic field energy. We analyze the models used to predict the performance of the energy harvesters and present a full system description.

Piezoelectric Materials Synthesized by the Hydrothermal Method and Their Applications

Directory of Open Access Journals (Sweden)

Takeshi Morita

2010-12-01

Full Text Available Synthesis by the hydrothermal method has various advantages, including low reaction temperature, three-dimensional substrate availability, and automatic polarization alignment during the process. In this review, powder synthesis, the fabrication of piezoelectric thin films, and their applications are introduced. A polycrystalline lead zirconate titanate (PZT thin film was applied to a micro ultrasonic motor, and an epitaxial lead titanate (PbTiO3 thin film was estimated as a ferroelectric data storage medium. Ferroelectric and piezoelectric properties were successfully obtained for epitaxial PbTiO3 films. As lead-free piezoelectric powders, KNbO3 and NaNbO3 powders were synthesized by the hydrothermal method and sintered together to form (K,NaNbO3 ceramics, from which reasonable piezoelectric performance was achieved.

The effect of temperature and loading frequency on the converse piezoelectric response of soft PZT ceramics

Science.gov (United States)

Dapeng, Zhu; Qinghui, Jiang; Yingwei, Li

2017-12-01

The converse piezoelectric coefficient d 33 of soft PZT ceramics was measured from 20 °C to 150 °C under different loading frequency. Results showed that in the tested temperature range, the evolution of d 33 obeys the Rayleigh-law behavior. The influence of temperature on d 33 is a little complicated. For instance, the maximum d 33 was observed at 150 °C when the applied electric field E was at 0.1 kV mm-1. When E increased to 0.3 kV mm-1 and 0.4 kV mm-1, the maximum d 33 was observed at 120 °C and 100 °C, respectively. Such behaviors are rationalized by the evolution of the Rayleigh parameters d init and α. For d init, it increases as temperature increases. While for α, it first increases and then decreases with the increase of temperature due to the evolution of the spontaneous strain and the volume of the switched domains. In the tested loading frequency, d 33 decreased linearly with the logarithm of the frequency of electric field. With the increase of temperature, the influence of frequency on d 33 gradually weakened, implying that at high temperature, the motion of domain walls became active and the pinning effect of defects nearly disappeared.

Wave propagation in a piezoelectric solid bar of circular cross-section immersed in fluid

International Nuclear Information System (INIS)

Ponnusamy, P.

2013-01-01

Wave propagation in a piezoelectric solid bar of circular cross-section immersed in fluid is discussed using three-dimensional theory of piezoelectricity. The equations of motion of the cylinder are formulated using the constitutive equations of a piezoelectric material. The equations of motion of the fluid are formulated using the constitutive equations of an inviscid fluid. Three displacement potential functions are introduced to uncouple the equations of motion, electric conduction. The frequency equation of the coupled system consisting of cylinder and fluid is developed under the assumption of perfect-slip boundary conditions at the fluid–solid interfaces. The frequency equations are obtained for longitudinal and flexural modes of vibration and are studied numerically for PZT-4 material bar immersed in fluid. The computed non-dimensional wave numbers are presented in the form of dispersion curves. The secant method is used to obtain the roots of the frequency equation. -- Highlights: ► Wave propagation in a piezoelectric solid bar of circular cross-section immersed in fluid is analyzed using secant method. ► Solid–fluid interaction for piezoelectric material of PZT-4 is analyzed using the boundary conditions. ► The computed non-dimensional wave numbers are plotted in the form of dispersion curves and studied its characters. ► A comparison is made between the non-dimensional wave numbers obtained by the author with the literature results

Energy harvesting for microsystems

Energy Technology Data Exchange (ETDEWEB)

Ruichao Xu

2012-05-15

The purpose of this project is to design and fabricate piezoelectric energy harvesters based on integration of Pb(ZrxTi1-x)O3 (PZT) thick film technology and silicon microtechnology. The fabrication processes are carried out in close collaboration with Meggitt Sensing Systems (MSS) who has the unique expertise to screen print piezoelectric thick film layers, thus all screen printing steps are done by MSS while the silicon micromachining is carried out at Danchip facility at DTU. The presented energy harvesters are all based on using piezoelectric thick film operating in the 31-mode to generate power when strained. Three archetypes of the numerous fabricated energy harvesters will be presented in detail, they represent three major milestones in this project. The first energy harvester archetype has an unimorph cantilever beam, which consists of a 20 {mu}m silicon layer and 10-30 {mu}m screen printed PZT layer, anchored on a silicon frame at one end and attached to a silicon proof mass at the other. Electrodes will cover both side of the PZT layer, so the harvested energy can be collected electrically. The second archetype has a bimorph cantilever beam, which consists of two 15-35 {mu}m PZT layers, anchored on a silicon frame at the one end and attached to a silicon proof mass at the other. Electrodes are deposited below, between and above the two PZT layers. The root mean square (RMS) power output measured on this type of harvesters is as high as 37.1{mu}W at 1 g. The third archetype is similar to the first one, the screen printed PZT layer is replaced by a lead free piezoelectric material, (KxNa1-x)NbO3 (KNN). Some of the major challenges encountered during the development processes are bad adhesion, fragile structures and short circuiting through the PZT layer. All of which have being fully or partially solved in this project. The final energy harvesters are designed to be used in an energy harvester powered wireless sensing system. (Author)

Reconstruction of the domain orientation distribution function of polycrystalline PZT ceramics using vector piezoresponse force microscopy.

Science.gov (United States)

Kratzer, Markus; Lasnik, Michael; Röhrig, Sören; Teichert, Christian; Deluca, Marco

2018-01-11

Lead zirconate titanate (PZT) is one of the prominent materials used in polycrystalline piezoelectric devices. Since the ferroelectric domain orientation is the most important parameter affecting the electromechanical performance, analyzing the domain orientation distribution is of great importance for the development and understanding of improved piezoceramic devices. Here, vector piezoresponse force microscopy (vector-PFM) has been applied in order to reconstruct the ferroelectric domain orientation distribution function of polished sections of device-ready polycrystalline lead zirconate titanate (PZT) material. A measurement procedure and a computer program based on the software Mathematica have been developed to automatically evaluate the vector-PFM data for reconstructing the domain orientation function. The method is tested on differently in-plane and out-of-plane poled PZT samples, and the results reveal the expected domain patterns and allow determination of the polarization orientation distribution function at high accuracy.

DEVELOPMENT OF SIGNAL PROCESSING TOOLS AND HARDWARE FOR PIEZOELECTRIC SENSOR DIAGNOSTIC PROCESSES

Energy Technology Data Exchange (ETDEWEB)

OVERLY, TIMOTHY G. [Los Alamos National Laboratory; PARK, GYUHAE [Los Alamos National Laboratory; FARRAR, CHARLES R. [Los Alamos National Laboratory

2007-02-09

This paper presents a piezoelectric sensor diagnostic and validation procedure that performs in -situ monitoring of the operational status of piezoelectric (PZT) sensor/actuator arrays used in structural health monitoring (SHM) applications. The validation of the proper function of a sensor/actuator array during operation, is a critical component to a complete and robust SHM system, especially with the large number of active sensors typically involved. The method of this technique used to obtain the health of the PZT transducers is to track their capacitive value, this value manifests in the imaginary part of measured electrical admittance. Degradation of the mechanical/electric properties of a PZT sensor/actuator as well as bonding defects between a PZT patch and a host structure can be identified with the proposed procedure. However, it was found that temperature variations and changes in sensor boundary conditions manifest themselves in similar ways in the measured electrical admittances. Therefore, they examined the effects of temperature variation and sensor boundary conditions on the sensor diagnostic process. The objective of this study is to quantify and classify several key characteristics of temperature change and to develop efficient signal processing techniques to account for those variations in the sensor diagnostis process. In addition, they developed hardware capable of making the necessary measurements to perform the sensor diagnostics and to make impedance-based SHM measurements. The paper concludes with experimental results to demonstrate the effectiveness of the proposed technique.

Universal phase diagram for high-piezoelectric perovskite systems

NARCIS (Netherlands)

Cox, D.E.; Noheda, B.; Shirane, G.; Uesu, Y.; Fujishiro, K.; Yamada, Y.

2001-01-01

Strong piezoelectricity in perovskite-type PbZn1-xTixO3 (PZT) and Pb(Zn1/3Nb2/3)O3–PbTiO3 (PZN–PT) systems is generally associated with the existence of a morphotropic phase boundary (MPB) separating regions with rhombohedral and tetragonal symmetry. An x-ray study of PZN–9% PT has revealed the

The effects of substrate layer thickness on piezoelectric vibration energy harvesting with a bimorph type cantilever

Science.gov (United States)

Palosaari, Jaakko; Leinonen, Mikko; Juuti, Jari; Jantunen, Heli

2018-06-01

In this research four piezoelectric bimorph type cantilevers for energy harvesting were manufactured, measured and analyzed to study the effects of substrate layer thickness on energy harvesting efficiency and durability under different accelerations. The cantilevers had the same dimensions of the piezoelectric ceramic components, but had different thicknesses of the steel substrate (no steel, 30 μm, 50 μm and 75 μm). The cantilevers were tuned to the same resonance frequency with different sizes of tip mass (2.13 g, 3.84 g, 4.17 g and 5.08 g). The energy harvester voltage outputs were then measured across an electrical load near to the resonance frequency (∼40 Hz) with sinusoidal vibrations under different accelerations. The stress exhibited by the four cantilevers was compared and analyzed and their durability was tested with accelerations up to 2.5 g-forces.

Evolution of transverse piezoelectric response of lead zirconate titanate ceramics under hydrostatic pressure

International Nuclear Information System (INIS)

Li Fei; Xu Zhuo; Wei Xiaoyong; Gao Junjie; Zhang, Chonghui; Yao Xi; Jin Li

2009-01-01

The piezoelectric properties of 31-mode resonators of lead zirconate titanate ceramics under hydrostatic pressure from 0.1 to 325 MPa were evaluated by a fitting method, in which mechanical loss was taken into account. Our results based on the fitting method showed a hydrostatic pressure independent tendency of the piezoelectric coefficient and the electromechanical coupling factor because the adopted PZT ceramic can be considered as a linear system in our experiment, while two misleading tendencies of piezoelectric coefficient were obtained based on the resonance method when ignoring the contribution of the mechanical loss. (fast track communication)

High Performance Lead--free Piezoelectric Materials

OpenAIRE

Gupta, Shashaank

2013-01-01

Piezoelectric materials find applications in number of devices requiring inter-conversion of mechanical and electrical energy.  These devices include different types of sensors, actuators and energy harvesting devices. A number of lead-based perovskite compositions (PZT, PMN-PT, PZN-PT etc.) have dominated the field in last few decades owing to their giant piezoresponse and convenient application relevant tunability. With increasing environmental concerns, in the last one decade, focus has be...

Modeling of the Through-the-Thickness Electric Potentials of a Piezoelectric Bimorph Using the Spectral Element Method

Directory of Open Access Journals (Sweden)

Xingjian Dong

2014-02-01

Full Text Available An efficient spectral element (SE with electric potential degrees of freedom (DOF is proposed to investigate the static electromechanical responses of a piezoelectric bimorph for its actuator and sensor functions. A sublayer model based on the piecewise linear approximation for the electric potential is used to describe the nonlinear distribution of electric potential through the thickness of the piezoelectric layers. An equivalent single layer (ESL model based on first-order shear deformation theory (FSDT is used to describe the displacement field. The Legendre orthogonal polynomials of order 5 are used in the element interpolation functions. The validity and the capability of the present SE model for investigation of global and local responses of the piezoelectric bimorph are confirmed by comparing the present solutions with those obtained from coupled 3-D finite element (FE analysis. It is shown that, without introducing any higher-order electric potential assumptions, the current method can accurately describe the distribution of the electric potential across the thickness even for a rather thick bimorph. It is revealed that the effect of electric potential is significant when the bimorph is used as sensor while the effect is insignificant when the bimorph is used as actuator, and therefore, the present study may provide a better understanding of the nonlinear induced electric potential for bimorph sensor and actuator.

PZT Thin-Film Micro Probe Device with Dual Top Electrodes

Science.gov (United States)

Luo, Chuan

should be less than 3 mm in order to guarantee the first resonant frequency above 60 kHz. Finally, a package for the PZT thin-film micro probe device is developed to ensure its proper function in an aqueous environment, such as inside of cochlea. The package is an insulation layer of parylene coating on the probe. A finite element analysis indicates that a coating thickness of less than 1 mum will reduce the PZT diaphragm displacement by less than 10%. A special fixture is designed to hold a large number of probes for parylene deposition of a thickness of 250 nm. A packaged probe is then submerged in deionized water and functions properly for at least 55 hours. Displacement and impedance of the probe are measured via a laser Doppler vibrometer and an impedance analyzer, respectively. Experimental results show that displacement of the PZT diaphragm increases about 30% in two hours, after the probe is submerged in the deionized water. The impedance measurement shows consistent trends. A hypothesis to explain this unusual phenomenon is diffusion of water molecules into the PZT thin film. High-resolution SEM images of the probe indicate presence of numerous nano-pores in the surface of the PZT thin film, indirectly confirming the hypothesis. Keywords: PZT, Thin-Film, Dual Electrodes, Parylene Coating, Aqueous Environment, Cochlear Implant

Design and Research of Piezoelectric Ceramics Drive Power

Directory of Open Access Journals (Sweden)

Guang Ya LIU

2014-01-01

Full Text Available Piezoelectric amplifier is a very important part of the piezoelectric actuator. It does not only require high positioning accuracy, but also high frequency response. This paper designs the error amplifier drive power consisting of high-voltage op amp and discrete components, consisting of an error-amplified circuit, a power amplifier circuit, a feedback network and a discharge circuit. A compensation technique based on feedback zero compensation is proposed and it increases the frequency bandwidth and dynamic characteristics of the PZT power effectively. Through the power of the theoretical analysis and Multisim software simulation, the power supply has a good drive capability.

Nonlinear current-voltage behavior in PZT thin films

Energy Technology Data Exchange (ETDEWEB)

Xiao, Mi; Zhang, Weikang; Zhang, Zebin; Li, Shida; Zhang, Ping; Lan, Kuibo [Tianjin University, School of Electrical and Information Engineering, Tianjin (China)

2017-05-15

In this paper, Pb(Zr{sub 0.52}Ti{sub 0.48})O{sub 3} (PZT) thin films were prepared by sol-gel synthesis and characterized by X-ray diffraction, field emission scanning electron microscopy and current-voltage measurements. Here, we demonstrate that in addition to the outstanding ferroelectric and dielectric properties, the PZT films also have remarkably nonlinear current-voltage characteristics. Considering the contact of semi-conductive grains in the PZT films, a double Schottky barrier (DSB) model may be responsible for such phenomena. The test results show that with the decrease of annealing temperature and the increase of the film thickness, the threshold voltages (V{sub th}) increase obviously. The maximum V{sub th} value of 60.95 V and the minimum value of 6.9 V in our experiments were obtained from the five-layered samples annealed at 600 C and the two-layered samples annealed at 700 C, respectively. As a result, PZT thin film may lead to efficient switching and sensing devices. (orig.)

Stripe-PZT Sensor-Based Baseline-Free Crack Diagnosis in a Structure with a Welded Stiffener

Directory of Open Access Journals (Sweden)

Yun-Kyu An

2016-09-01

Full Text Available This paper proposes a stripe-PZT sensor-based baseline-free crack diagnosis technique in the heat affected zone (HAZ of a structure with a welded stiffener. The proposed technique enables one to identify and localize a crack in the HAZ using only current data measured using a stripe-PZT sensor. The use of the stripe-PZT sensor makes it possible to significantly improve the applicability to real structures and minimize man-made errors associated with the installation process by embedding multiple piezoelectric sensors onto a printed circuit board. Moreover, a new frequency-wavenumber analysis-based baseline-free crack diagnosis algorithm minimizes false alarms caused by environmental variations by avoiding simple comparison with the baseline data accumulated from the pristine condition of a target structure. The proposed technique is numerically as well as experimentally validated using a plate-like structure with a welded stiffener, reveling that it successfully identifies and localizes a crack in HAZ.

Stripe-PZT Sensor-Based Baseline-Free Crack Diagnosis in a Structure with a Welded Stiffener.

Science.gov (United States)

An, Yun-Kyu; Shen, Zhiqi; Wu, Zhishen

2016-09-16

This paper proposes a stripe-PZT sensor-based baseline-free crack diagnosis technique in the heat affected zone (HAZ) of a structure with a welded stiffener. The proposed technique enables one to identify and localize a crack in the HAZ using only current data measured using a stripe-PZT sensor. The use of the stripe-PZT sensor makes it possible to significantly improve the applicability to real structures and minimize man-made errors associated with the installation process by embedding multiple piezoelectric sensors onto a printed circuit board. Moreover, a new frequency-wavenumber analysis-based baseline-free crack diagnosis algorithm minimizes false alarms caused by environmental variations by avoiding simple comparison with the baseline data accumulated from the pristine condition of a target structure. The proposed technique is numerically as well as experimentally validated using a plate-like structure with a welded stiffener, reveling that it successfully identifies and localizes a crack in HAZ.

A piezoelectric micro generator worked at low frequency and high acceleration based on PZT and phosphor bronze bonding.

Science.gov (United States)

Tang, Gang; Yang, Bin; Hou, Cheng; Li, Guimiao; Liu, Jingquan; Chen, Xiang; Yang, Chunsheng

2016-12-08

Recently, piezoelectric energy harvesters (PEHs) have been paid a lot of attention by many researchers to convert mechanical energy into electrical and low level vibration. Currently, most of PEHs worked under high frequency and low level vibration. In this paper, we propose a micro cantilever generator based on the bonding of bulk PZT wafer and phosphor bronze, which is fabricated by MEMS technology, such as mechanical chemical thinning and etching. The experimental results show that the open-circuit output voltage, output power and power density of this fabricated prototype are 35 V, 321 μW and 8664 μW cm -3 at the resonant frequency of 100.8 Hz, respectively, when it matches an optimal loading resistance of 140 kΩ under the excitation of 3.0 g acceleration. The fabricated micro generator can obtain the open-circuit stable output voltage of 61.2 V when the vibration acceleration arrives at 7.0 g. Meanwhile, when this device is pasted on the vibrating vacuum pump, the output voltage is about 11 V. It demonstrates that this novel proposed device can scavenge high vibration level energy at low frequency for powering the inertial sensors in internet of things application.

A piezoelectric linear ultrasonic motor with the structure of a circular cylindrical stator and slider

International Nuclear Information System (INIS)

Sun, Dongming; Wang, Sheng; Sakurai, Junpei; Hata, Seiichi; Choi, Kee-Bong; Shimokohbe, Akira

2010-01-01

A piezoelectric linear ultrasonic motor is proposed, with a cylindrical stator and slider structure. The length and diameter of the motor are about 10 and 1.5 mm, respectively. The stator consists of two piezoelectric ceramic (PZT) tubes connected by a thin film metallic glass (TFMG) pipe. The stator is designed based on theoretical analyses and finite element method (FEM) simulation. The traveling wave propagation is obtained in the FEM simulation under the proper geometrical sizes, suitable boundary conditions and driving voltage signals. The trajectories of particles on the TFMG pipe are elliptical motion. In the experiment, a 25 µm thick TFMG pipe is fabricated using the rotating magnetron sputtering technique and the vibration characteristics of the stator are measured by a laser Doppler vibrometer (LDV) system. Bidirectional motion of the slider is observed around 600 kHz, the maximum velocity is near to 40 mm s −1 at 50 Vp–p for the loose slider and the maximum output force is 6 mN at 70 Vp–p for the tight slider

Direct piezoelectric effect d33 non-linearity in PZT ceramics

OpenAIRE

Pérez Pérez, Rafael; Albareda Tiana, Alfonso; Pérez Codina, Estel; García García, José Eduardo; Tiana Alsina, Jordi; Gorri Ochoa, José Antonio

2006-01-01

Se ha implementado una nueva técnica de medida aplicando un esfuerzo uniaxial sobre la muestra y midiendo la carga generada. Se aplica un esfuerzo suficientemente intenso para producir efectos no lineales, y se analiza la respuesta no sólo en función de la amplitud del esfuerzo sino de su valor instantáneo. Se ha observado que el coeficiente d33 aumenta siempre linealmente con la amplitud, tanto en las cerámicas PZT comerciales blandas como en las duras, en este último caso al revés de lo qu...

High-power piezoelectric characteristics of textured bismuth layer structured ferroelectric ceramics.

Science.gov (United States)

Ogawa, Hirozumi; Kawada, Shinichiro; Kimura, Masahiko; Shiratsuyu, Kousuke; Sakabe, Yukio

2007-12-01

Abstract-The high-power piezoelectric characteristics in h001i oriented ceramics of bismuth layer structured ferroelectrics (BLSF), SrBi(2)Nb(2)O(9) (SBN), (Bi,La)(4)Ti(3)O(12) (BLT), and CaBi(4)Ti(4)O(15) (CBT), were studied by a constant voltage driving method. These textured ceramics were fabricated by a templated grain growth (TGG) method, and their Lotgering factors were 95%, 97%, and 99%, respectively. The vibration velocities of the longitudinal mode (33-mode) increased proportionally to an applied electric field up to 2.5 m/s in these textured BLSF ceramics, although, the vibration velocity of the 33-mode was saturated at more than 1.0 m/s in the Pb(Mn,Nb)O(3)-PZT ceramics. The resonant frequencies were constant up to the vibration velocity of 2.5 m/s in the SBN and CBT textured ceramics; however, the resonant frequency decreased with increasing over the vibration velocity of 1.5 m/s in the BLT textured ceramics. The dissipation power density of the BLT was almost the same as that of the Pb(Mn,Nb)O(3)-PZT ceramics. However, the dissipation power densities of the SBN and CBT were lower than those of the BLT and Pb(Mn,Nb)O(3)-PZT ceramics. The textured SBN and CBT ceramics are good candidates for high-power piezoelectric applications.

Optimization of sensing and feedback control for vibration/flutter of rotating disk by PZT actuators via air coupled pressure.

Science.gov (United States)

Yan, Tianhong; Xu, Xinsheng; Han, Jianqiang; Lin, Rongming; Ju, Bingfeng; Li, Qing

2011-01-01

In this paper, a feedback control mechanism and its optimization for rotating disk vibration/flutter via changes of air-coupled pressure generated using piezoelectric patch actuators are studied. A thin disk rotates in an enclosure, which is equipped with a feedback control loop consisting of a micro-sensor, a signal processor, a power amplifier, and several piezoelectric (PZT) actuator patches distributed on the cover of the enclosure. The actuator patches are mounted on the inner or the outer surfaces of the enclosure to produce necessary control force required through the airflow around the disk. The control mechanism for rotating disk flutter using enclosure surfaces bonded with sensors and piezoelectric actuators is thoroughly studied through analytical simulations. The sensor output is used to determine the amount of input to the actuator for controlling the response of the disk in a closed loop configuration. The dynamic stability of the disk-enclosure system, together with the feedback control loop, is analyzed as a complex eigenvalue problem, which is solved using Galerkin's discretization procedure. The results show that the disk flutter can be reduced effectively with proper configurations of the control gain and the phase shift through the actuations of PZT patches. The effectiveness of different feedback control methods in altering system characteristics and system response has been investigated. The control capability, in terms of control gain, phase shift, and especially the physical configuration of actuator patches, are also evaluated by calculating the complex eigenvalues and the maximum displacement produced by the actuators. To achieve a optimal control performance, sizes, positions and shapes of PZT patches used need to be optimized and such optimization has been achieved through numerical simulations.

Multiscale numerical study on ferroelectric nonlinear response of PZT thin films (Conference Presentation)

Science.gov (United States)

Wakabayashi, Hiroki; Uetsuji, Yasutomo; Tsuchiya, Kazuyoshi

2017-06-01

PZT thin films have excellent performance in deformation precision and response speed, so it is used widely for actuators and sensors of Micro Electro Mechanical System (MEMS). Although PZT thin films outputs large piezoelectricity at morphotropic phase bounfary (MPB), it shows a complicated hysteresis behavior caused by domain switching and structural phase transition between tetragonal and rhombohedral. In general, PZT thin films have some characteristic crystal morphologies. Additionally mechanical strains occur by lattice mismatch with substrate. Therefore it is important for fabrication and performance improvement of PZT thin films to understand the relation between macroscopic hysteresis response and microstructural changes. In this study, a multiscale nonlinear finite element simulation was proposed for PZT thin films at morphotropic phase boundary (MPB) on the substrate. The homogenization theory was employed for scale-bridging between macrostructure and microstructure. Figure 1 shows the proposed multiscale nonlinear simulation [1-3] based on the homogenization theory. Macrostructure is a homogeneous structure to catch the whole behaviors of actuators and sensors. And microstructure is a periodic inhomogeneous structure consisting of domains and grains. Macrostructure and microstructure are connected perfectly by homogenization theory and are analyzed by finite element method. We utilized an incremental form of fundamental constitutive law in consideration with physical property change caused by domain switching and structural phase transition. The developed multiscale finite element method was applied to PZT thin films with lattice mismatch strain on the substrate, and the relation between the macroscopic hysteresis response and microscopic domain switching and structural phase transition were investigated. Especially, we discuss about the effect of crystal morphologies and lattice mismatch strain on hysteresis response.

Ferroelectric and Piezoelectric properties of (111) oriented lanthanum modified lead zirconate titanate film

International Nuclear Information System (INIS)

Dutta, Soma; Antony Jeyaseelan, A.; Sruthi, S.

2014-01-01

Lanthanum modified lead zirconate titanate (PLZT) thick film with molecular formula of Pb 0.92 La 0.08 (Zr 0.52 Ti 0.48 ) 0.98 O 3 was grown preferentially along (111) direction on Pt/SiO 2 /Si (platinum/silicon oxide/silicon) substrate by spin coating of chemical solution. The directional growth of the film was facilitated by platinum (Pt) (111) template and rapid thermal annealing. X-ray diffraction pattern and atomic force microscopy revealed the preferential growth of the PLZT film. The film was characterized for ferroelectric and detailed piezoelectric properties in a parallel plate capacitor (metal–PLZT–metal) configuration. Ferroelectric characterization of the film showed saturated hysteresis loop with remanent polarization and coercive electric field values of 10.14 μC/cm 2 and 42 kV/cm, respectively, at an applied field of 300 kV/cm. Longitudinal piezoelectric coefficient (d 33,f ) was measured by employing converse piezoelectric effect where electrical charge response and displacement were measured with electrical voltage excitation on the sample electrodes. The effective transverse piezoelectric coefficient (e 31,f ) was derived from charge measurement with an applied mechanical excitation strain by using the four point bending method. d 33,f and e 31,f coefficients of PLZT films were found to be 380 pm/V and − 0.831 C/m 2 respectively. - Highlights: • PLZT (111) film is prepared by spin coating of chemical sol on Pt (111) template. • Piezoelectric d 33 value (380 pm/V) of PLZT film is found 20% higher than PZT. • Transverse piezocoefficient e 31,f of PLZT film is reported for the first time

Self-vibration cancellation of a novel bi-directional magnetized NdFeB/magnetostrictive/piezoelectric laminate.

Science.gov (United States)

Leung, Chung Ming; Wang, Feifei; Wang, Ya

2016-06-01

A novel magnetoelectric (ME) laminated composite structure is proposed in this work, aiming to provide a good self-vibration cancellation performance under the magnetic field detection environment. The proposed structure consists of two Terfenol-D magnetostrictive alloy plates which are revised and length-magnetized by two NdFeB magnets bonded on the top surface of a thickness-polarized Pb(Zr, Ti)O3 (PZT) ceramic plate with separate electrodes. Experiments have shown that great vibration suppression up to 44 dB under harmonic disturbance was observed. The ME coefficient of the proposed structure also reaches up to ∼29 mV/Oe at non-resonance frequency and 758 mV/Oe at resonance frequency of 79 kHz which is ∼2 times larger than the traditional L-T Terfenol-D/PZT bilayer configuration of the same scale. Such performance improvement is achieved based on the bi-directional magnetic field bias (HBias) of two NdFeB magnets in magnetostrictive layer, internal in-series electrical wire connection in piezoelectric layer. The proposed design has great potential to be used for industrial applications associated with heavy environmental vibration noise.

Self-vibration cancellation of a novel bi-directional magnetized NdFeB/magnetostrictive/piezoelectric laminate

Science.gov (United States)

Leung, Chung Ming; Wang, Feifei; Wang, Ya

2016-06-01

A novel magnetoelectric (ME) laminated composite structure is proposed in this work, aiming to provide a good self-vibration cancellation performance under the magnetic field detection environment. The proposed structure consists of two Terfenol-D magnetostrictive alloy plates which are revised and length-magnetized by two NdFeB magnets bonded on the top surface of a thickness-polarized Pb(Zr, Ti)O3 (PZT) ceramic plate with separate electrodes. Experiments have shown that great vibration suppression up to 44 dB under harmonic disturbance was observed. The ME coefficient of the proposed structure also reaches up to ˜29 mV/Oe at non-resonance frequency and 758 mV/Oe at resonance frequency of 79 kHz which is ˜2 times larger than the traditional L-T Terfenol-D/PZT bilayer configuration of the same scale. Such performance improvement is achieved based on the bi-directional magnetic field bias (HBias) of two NdFeB magnets in magnetostrictive layer, internal in-series electrical wire connection in piezoelectric layer. The proposed design has great potential to be used for industrial applications associated with heavy environmental vibration noise.

Displacement and resonance behaviors of a piezoelectric diaphragm driven by a double-sided spiral electrode

KAUST Repository

Shen, Zhiyuan

2012-04-03

This paper presents the design of a lead zirconate titanate (PZT) diaphragm actuated by double-sided patterned electrodes. Au/Cr electrodes were deposited on bulk PZT wafers by sputtering while patterned by a lift-off process. SU-8 thick film was used to form the structural layer. Double-spiral electrode induced in-plane poling and piezoelectric elongation are converted to an out-of-plane displacement due to the confined boundary condition. The influence of different drive configurations and electrode parameters on deflection has been calculated by finite element methods (FEM) using a uniform field model. Impedance and quasi-static displacement spectra of the diaphragm were measured after poling. Adouble-sided patterned electrode diaphragm can be actuated by more drive configurations than a single-sided one. Compared with a single-sided electrode drive, a double-sided out-of-phase drive configuration increases the coupling coefficient of the fundamental resonance from 7.6% to 11.8%. The displacement response of the diaphragm increases from 2.6 to 8.6nmV 1. Configurations including the electric field component perpendicular to the poling direction can stimulate shear modes of the diaphragm. © 2012 IOP Publishing Ltd.

Study on the piezoelectric behavior and structural changes of strontium doped PZT

International Nuclear Information System (INIS)

Silva, M.S. da; Lemos, L.; Souza, E.F.; Cavalheiro, A.A.; Longo, E.; Zaghete, M.A.

2014-01-01

Lead zirconate titanate, with Zr/Ti ratio of 53/47 was prepared by the polymeric precursor method. The powders were doped with 0.0, 0.2, 0.4 and 0.6 mol% of Sr 2+ and the effects of Sr 2+ additions on piezoelectric properties and on the phase constitution were investigated by XRD. The percentages of tetragonal and rhombohedral phases were calculated through Rietveld refinement. The results indicated that addition of Sr 2+ ions in the amount of 0.4 mol% in the ceramic structure maximally increase the values of piezoelectric parameter to d 33 = 289 μC/N and K p = 0.43. The values found for the piezoelectric properties were among the highest at the concentration of 0.4 mol% of strontium and this composition showed the highest structural change from the rhombohedral to the tetragonal phase perovskita. (author)

Y3Fe5O12/Na,Bi,Sr-doped PZT particulate magnetoelectric composites

Science.gov (United States)

Lisnevskaya, I. V.; Bobrova, I. A.; Lupeiko, T. G.; Agamirzoeva, M. R.; Myagkaya, K. V.

2016-05-01

Magnetoelectric (ME) composites of Na, Bi, Sr substituted lead zirconate titanate (PZT) and yttrium iron garnet having representative formula (100-x) wt% Na,Bi,Sr-doped PZT (PZTNB-1)+x wt% Y3Fe5O12 (YIG) with x=10-90 were manufactured using powdered components obtained through sol-gel processes. It is shown that the decrease in sintering temperature provided by the use of finely dispersed PZTNB-1 and YIG powders allows to significantly reduce content of fluorite-like foreign phase based on zirconium oxide, which forms due to the interfacial interaction during heat treatment and becomes stabilized by yttrium oxide. Connectivity has considerable effect on the value of ME coefficient of composite ceramics. With the same x value, ΔE/ΔH characteristic decreases when changing from 0-3-type structured composites (PZT grains embedded in ferrite matrix) to 3-3-(interpenetrating network of two phases) and especially 3-0-type samples (YIG grains embedded in PZT matrix); in the last case this can be attributed to the substrate clamping effect when ferrite grains are clamped with piezoelectric matrix. ΔE/ΔH value of 0-3 composites with x=40-60 wt% was found to be ∼1.6 mV/(cm Oe).

Antiferrodistortive phase transitions and ground state of PZT ceramics

International Nuclear Information System (INIS)

Pandey, Dhananjai

2013-01-01

The ground state of the technologically important Pb(Zr x Ti (1-x) )O 3 , commonly known as PZT, ceramics is currently under intense debate. The phase diagram of this material shows a morphotropic phase boundary (MPB) for x∼0.52 at 300K, across which a composition induced structural phase transition occurs leading to maximization of the piezoelectric properties. In search for the true ground state of the PZT in the MPB region, Beatrix Noheda and coworkers first discovered a phase transition from tetragonal (space group P4mm) to an M A type monoclinic phase (space group Cm) at low temperatures for x=0.52. Soon afterwards, we discovered yet another low temperature phase transition for the same composition in which the M A type (Cm) monoclinic phase transforms to another monoclinic phase with Cc space group. We have shown that the Cm to Cc phase transition is an antiferrodistortive (AFD) transition involving tilting of oxygen octahedra leading to unit cell doubling and causing appearance of superlattice reflections which are observable in the electron and neutron diffraction patterns only and not in the XRD patterns, as a result of which Noheda and coworkers missed the Cc phase in their synchrotron XRD studies at low temperatures. Our findings were confirmed by leading groups using neutron, TEM, Raman and high pressure diffraction studies. The first principles calculations also confirmed that the true ground state of PZT in the MPB region has Cc space group. However, in the last couple of years, the Cc space group of the ground state has become controversial with an alternative proposal of R3c as the space group of the ground state phase which is proposed to coexist with the metastable Cm phase. In order to resolve this controversy, we recently revisited the issue using pure PZT and 6% Sr 2+ substituted PZT, the latter samples show larger tilt angle on account of the reduction in the average cationic radius at the Pb 2+ site. Using high wavelength neutrons and high

Size effects on structural and dielectric properties of PZT thin films at compositions around the morpho tropic phase boundary

International Nuclear Information System (INIS)

Lima, Elton Carvalho; Araujo, Eudes Borges; Souza Filho, Antonio Gomes de; Bdikin, Igor

2011-01-01

Full text: The demand for portability in consumer electronics has motivated the understanding of size effects on ferroelectric thin films. The actual comprehension of these effects in ferroelectrics is unsatisfactory, since the polarization interacts more strongly than other order parameters such as strain and charge. As a result, extrinsic effects are produced if these variables are uncontrolled and problems such as ferroelectric paraelectric phase transition at nanometers scale remains an unsolved issue. In the present work, the effects of thickness and compositional fractions on the structural and dielectric properties of PbZr 1-x Ti x O 3 (PZT) thin films were studied at a composition around the morphotropic phase boundary (x = 0.50). For this purpose, thin films with different thicknesses and different PbO excess were deposited on Si(100) and Pt=T iO 2 =SiO 2 =Si substrates by a chemical method and crystallized in electric furnace at 700 deg C for 1 hour. The effects of substrate, pyrolysis temperature and excess lead addition in the films are reported. For films with 10 mol% PbO in excess, the pyrolysis in the regime of 300 deg C for 30 minutes was observed to yield PZT pyrochlore free thin films deposited on Pt=T iO 2 =SiO 2 =Si substrate. Out this condition, the transformation from amorphous to the pyrochlore metastable phase is kinetically more favorable that a transformation to the perovskite phase, which is thermodynamically stable. Rietveld refinements based on X-ray diffraction results showed that films present a purely tetragonal phase and that this phase does not change when the film thickness decreases. The dielectric permittivity measurements showed a monoclinic → tetragonal phase transition at 198K. Results showed that the dielectric permittivity (ε) increases continuously from 257 to 463, while the thickness of the PZT films increases from 200 to 710 nm. These results suggests that interface pinning centers can be the responsible mechanism by

A double B1-mode 4-layer laminated piezoelectric linear motor.

Science.gov (United States)

Li, Xiaotian; Chen, Zhijiang; Dong, Shuxiang

2012-12-01

We report a miniature piezoelectric ultrasonic linear motor that is made of four Pb(Zr,Ti)O(3) (PZT) piezoelectric ceramic layers for low-voltage work. The 4-layer piezoelectric laminate works in two orthogonal first-bending modes for producing elliptical oscillations, which are then used to drive a contacting slider into continuous linear motion. Experimental results show that the miniature linear motor (size: 4 × 4 × 12 mm, weight: 1.7 g) can generate a large driving force of 0.48 N and a linear motion speed of up to 160 mm/s, using a 40 V(pp)/mm voltage drive at its resonance frequency of 64.5 kHz. The maximum efficiency of the linear motor is 30%.

Piezoelectric Polymer Ultrasound Transducers and Its Biomedical Applications

Energy Technology Data Exchange (ETDEWEB)

Ha, Kang Lyeol; Cao, Yanggang [Department of Physics, Pukyong National University, Busan (Korea, Republic of)

2012-10-15

PVDF(poly vinylidene fluoride) and P(VDF-TrFE)(poly vinylidene fluoride-tetrafluoroethylene) are the typical piezoelectric polymers with unique properties. Even they are inferior to conventional piezoelectric ceramics PZT in electromechanical conversion efficiency and interior loss, though they are superior in receiving sensitivity and frequency bandwidth. Their acoustic impedances are relatively close to water or biological tissue and it is easier to make thin film than other piezoelectric materials. Furthermore, the film is so flexible that it is easy to attach on a complex surface. Those properties are suitable for the ultrasound transducers which are useful for medical and biological application, so that various types of polymer transducers have been developed. In this paper, several important considerations for design and fabrication of piezoelectric polymer transducers were described and their effect on the transducer performance were demonstrated through the KLM model analysis. Then, it was briefly reviewed about the structures of the polymer transducers developed for obtaining images as well as the characteristics of the images in several important medical and biological application fields.

Mechanical and Vibration Testing of Carbon Fiber Composite Material with Embedded Piezoelectric Sensors

Science.gov (United States)

Duffy, Kirsten P.; Lerch, Bradley A.; Wilmoth, Nathan G.; Kray, Nicholas; Gemeinhardt, Gregory

2012-01-01

Piezoelectric materials have been proposed as a means of decreasing turbomachinery blade vibration either through a passive damping scheme, or as part of an active vibration control system. For polymer matrix fiber composite (PMFC) blades, the piezoelectric elements could be embedded within the blade material, protecting the brittle piezoceramic material from the airflow and from debris. Before implementation of a piezoelectric element within a PMFC blade, the effect on PMFC mechanical properties needs to be understood. This study attempts to determine how the inclusion of a packaged piezoelectric patch affects the material properties of the PMFC. Composite specimens with embedded piezoelectric patches were tested in four-point bending, short beam shear, and flatwise tension configurations. Results show that the embedded piezoelectric material does decrease the strength of the composite material, especially in flatwise tension, attributable to failure at the interface or within the piezoelectric element itself. In addition, the sensing properties of the post-cured embedded piezoelectric materials were tested, and performed as expected. The piezoelectric materials include a non-flexible patch incorporating solid piezoceramic material, and two flexible patch types incorporating piezoelectric fibers. The piezoceramic material used in these patches was Navy Type-II PZT.

New fabrication of high-frequency (100-MHz) ultrasound PZT film kerfless linear array.

Science.gov (United States)

Zhu, Benpeng; Chan, Ngai Yui; Dai, Jiyan; Shung, K Kirk; Takeuchi, Shinichi; Zhou, Qifa

2013-04-01

The paper describes the design, fabrication, and measurements of a high-frequency ultrasound kerfless linear array prepared from hydrothermal lead zirconate titanate (PZT) thick film. The 15-μm hydrothermal PZT thick film with an area of 1 × 1 cm, obtained through a self-separation process from Ti substrate, was used to fabricate a 32-element 100-MHz kerfless linear array with photolithography. The bandwidth at -6 dB without matching layer, insertion loss around center frequency, and crosstalk between adjacent elements were measured to be 39%, -30 dB, and -15 dB, respectively.

Enhanced piezoelectricity and stretchability in energy harvesting devices fabricated from buckled PZT ribbons.

Science.gov (United States)

Qi, Yi; Kim, Jihoon; Nguyen, Thanh D; Lisko, Bozhena; Purohit, Prashant K; McAlpine, Michael C

2011-03-09

The development of a method for integrating highly efficient energy conversion materials onto soft, biocompatible substrates could yield breakthroughs in implantable or wearable energy harvesting systems. Of particular interest are devices which can conform to irregular, curved surfaces, and operate in vital environments that may involve both flexing and stretching modes. Previous studies have shown significant advances in the integration of highly efficient piezoelectric nanocrystals on flexible and bendable substrates. Yet, such inorganic nanomaterials are mechanically incompatible with the extreme elasticity of elastomeric substrates. Here, we present a novel strategy for overcoming these limitations, by generating wavy piezoelectric ribbons on silicone rubber. Our results show that the amplitudes in the waves accommodate order-of-magnitude increases in maximum tensile strain without fracture. Further, local probing of the buckled ribbons reveals an enhancement in the piezoelectric effect of up to 70%, thus representing the highest reported piezoelectric response on a stretchable medium. These results allow for the integration of energy conversion devices which operate in stretching mode via reversible deformations in the wavy/buckled ribbons.

Multifunctional Device based on phosphor-piezoelectric PZT: lighting, speaking, and mechanical energy harvesting.

Science.gov (United States)

Lee, Sunghoon; Kang, Taewook; Lee, Wunho; Afandi, Mohammad M; Ryu, Jongho; Kim, Jongsu

2018-01-10

We demonstrated the tri-functional device based on all powder-processing methods by using ZnS powder as phosphor layer and piezoelectric material as dielectric layer. The fabricated device generated the electroluminescent (EL) light from phosphor and the sound from piezoelectric sheet under a supply of external electric power, and additionally harvested the reverse-piezoelectric energy to be converted into EL light. Under sinusoidal applied voltage, EL luminances were exponentially increased with a maximum luminous efficiency of 1.3 lm/W at 40 V and 1,000 Hz, and sound pressure levels (SPLs) were linearly increased. The EL luminances were linearly dependent on applied frequency while the SPLs showed the parabolic increase behavior below 1,000 Hz and then the flat response. The temperature dependence on EL luminances and SPLs was demonstrated; the former was drastically increased and the latter was slightly decreased with the increase of temperature. Finally, as an energy harvesting application, the piezoelectric-induced electroluminescence effect was demonstrated by applying only mechanical pressure to the device without any external electric power.

A novel ultra-planar, long-stroke and low-voltage piezoelectric micromirror

Science.gov (United States)

Bakke, Thor; Vogl, Andreas; Żero, Oleg; Tyholdt, Frode; Johansen, Ib-Rune; Wang, Dag

2010-06-01

A novel piston-type micromirror with a stroke of up to 20 µm at 20 V formed out of a silicon-on-insulator wafer with integrated piezoelectric actuators was designed, fabricated and characterized. The peak-to-valley planarity of a 2 mm diameter mirror was better than 15 nm, and tip-to-tip tilt upon actuation less than 30 nm. A resonance frequency of 9.8 kHz was measured. Analytical and finite element models were developed and compared to measurements. The design is based on a silicon-on-insulator wafer where the circular mirror is formed out of the handle silicon, thus forming a thick, highly rigid and ultra-planar mirror surface. The mirror plate is connected to a supporting frame through a membrane formed out of the device silicon layer. A piezoelectric actuator made of lead-zirconate-titanate (PZT) thin film is structured on top of the membrane, providing mirror deflection by deformation of the membrane. Two actuator designs were tested: one with a single ring and the other with a double ring providing bidirectional movement of the mirror. The fabricated mirrors were characterized by white light interferometry to determine the static and temporal response as well as mirror planarity.

A novel ultra-planar, long-stroke and low-voltage piezoelectric micromirror

International Nuclear Information System (INIS)

Bakke, Thor; Vogl, Andreas; Żero, Oleg; Tyholdt, Frode; Johansen, Ib-Rune; Wang, Dag

2010-01-01

A novel piston-type micromirror with a stroke of up to 20 µm at 20 V formed out of a silicon-on-insulator wafer with integrated piezoelectric actuators was designed, fabricated and characterized. The peak-to-valley planarity of a 2 mm diameter mirror was better than 15 nm, and tip-to-tip tilt upon actuation less than 30 nm. A resonance frequency of 9.8 kHz was measured. Analytical and finite element models were developed and compared to measurements. The design is based on a silicon-on-insulator wafer where the circular mirror is formed out of the handle silicon, thus forming a thick, highly rigid and ultra-planar mirror surface. The mirror plate is connected to a supporting frame through a membrane formed out of the device silicon layer. A piezoelectric actuator made of lead–zirconate–titanate (PZT) thin film is structured on top of the membrane, providing mirror deflection by deformation of the membrane. Two actuator designs were tested: one with a single ring and the other with a double ring providing bidirectional movement of the mirror. The fabricated mirrors were characterized by white light interferometry to determine the static and temporal response as well as mirror planarity.

Broadband Electromagnetic Emission from PZT Ferroelectric Ceramics after Shock Loading

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Fiodoras ANISIMOVAS

2013-12-01

Full Text Available It was experimentally registered pulsed electromagnetic (EM radiation in frequency range higher than television one using wideband horns with coaxial and waveguide outputs. The EM radiation was received during shock loading of lead zirconate titanate (PZT ceramics cylinders in conventional piezoelectric ignition mechanisms. Digital oscilloscope allows registering whole series of EM pulses and each pulse from the series transmitted from horn antenna of (1 – 18 GHz operating band frequencies. There is (1 – 4 ms delay between the shock and the first pulse of the series. Duration of the series is about (3 – 4 ms. The PZT cylinders were cleaved along their axes and the surfaces formed in the process were investigated by scanning electron microscope. It was concluded that from electrical point of view PZT ceramics contain interacting subsystems. It was found that EM radiation spectrum of pulse detected by waveguide detector heads has harmonics reaching 80 GHz. Presence of harmonics higher than 20 GHz indicates on radiation due to deceleration of electrons emitted during the switching. The EM pulses in the series appear randomly and have different amplitudes which partly confirmed thesis on independent switching dynamics of small volumes governed by a local electric field.DOI: http://dx.doi.org/10.5755/j01.ms.19.4.3137

Development of a Piezoelectric Vacuum Sensing Component for a Wide Pressure Range

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Bing-Yu Wang

2014-11-01

Full Text Available In this study, we develop a clamped–clamped beam-type piezoelectric vacuum pressure sensing element. The clamped–clamped piezoelectric beam is composed of a PZT layer and a copper substrate. A pair of electrodes is set near each end. An input voltage is applied to a pair of electrodes to vibrate the piezoelectric beam, and the output voltage is measured at the other pair. Because the viscous forces on the piezoelectric beam vary at different air pressures, the vibration of the beam depends on the vacuum pressure. The developed pressure sensor can sense a wide range of pressure, from 6.5 × 10−6 to 760 Torr. The experimental results showed that the output voltage is inversely proportional to the gas damping ratio, and thus, the vacuum pressure was estimated from the output voltage.

Effects of Mn doping on the ferroelectric properties of PZT thin films

International Nuclear Information System (INIS)

Zhang Qi

2004-01-01

The effects of Mn doping on the ferroelectric properties of Pb(Zr 0.3 Ti 0.7 )O 3 (PZT) thin films on Pt/Ti/SiO 2 /Si substrates have been investigated. The composition of the PZT and Mn doping level are Pb(Zr 0.3 Ti 0.7 ) 1-x Mn x O 3 (x = 0,0.2,0.5,1,2,4 mol%). The PZT thin films doped with a small amount of Mn 2+ (x ≤ 1) showed almost no hysteretic fatigue up to 10 10 switching bipolar pulse cycles, coupled with excellent retention properties. However, excessive additions of manganese made the fatigue behaviour worse. We propose that the addition of small amounts of Mn is able to reduce the oxygen vacancy concentration due to the combination of Mn 2+ and oxygen vacancies in PZT films, forming Mn 4+ ions. The interfacial layer between the Pt electrode and PZT films and Mn-doped PZT (x = 4) was detected by measuring the dielectric constant of thin films of different thickness. However, this interfacial layer was not detected in Mn-doped PZT (x = 1). These observations support the concept of the preferential electromigration of oxygen vacancies into sites in planes parallel to the electrodes, which is probably responsible for the hysteretic fatigue

Investigation of the performances of PZT vs rare earth (BaLaTiO3 vibration based energy harvester

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Pak Nehemiah

2017-01-01

Full Text Available This study proposes the investigation of two piezoelectric material namely PZT and Lanthanum Doped Barium Titanate (BaLaTiO3 performance as a vibration based energy harvester. The piezoelectric material when applied mechanical stress or strain produces electricity through the piezoelectric effect. The vibration energy would exude mechanical energy and thus apply mechanical force on the energy harvester. The energy harvester would be designed and simulated using the piezoelectric material individually. The studied outputs are divided to frequency response, the load dependence, and the acceleration dependence whereby measurement are observed and taken at maximum power output. The simulation is done using the cantilevers design which employs d31 type of constants. Three different simulations to study the dependence of output power on the resonant frequency response, load and acceleration have found that material that exhibit highest power generation was the BaLaTiO3.

Investigation of the performances of PZT vs rare earth (BaLaTiO3) vibration based energy harvester

Science.gov (United States)

Pak, Nehemiah; Aris, Hasnizah; Nadia Taib, Bibi

2017-11-01

This study proposes the investigation of two piezoelectric material namely PZT and Lanthanum Doped Barium Titanate (BaLaTiO3) performance as a vibration based energy harvester. The piezoelectric material when applied mechanical stress or strain produces electricity through the piezoelectric effect. The vibration energy would exude mechanical energy and thus apply mechanical force on the energy harvester. The energy harvester would be designed and simulated using the piezoelectric material individually. The studied outputs are divided to frequency response, the load dependence, and the acceleration dependence whereby measurement are observed and taken at maximum power output. The simulation is done using the cantilevers design which employs d31 type of constants. Three different simulations to study the dependence of output power on the resonant frequency response, load and acceleration have found that material that exhibit highest power generation was the BaLaTiO3.

Piezoelectric and mechanical properties of fatigue resistant, self-healing PZT–ionomer composites

International Nuclear Information System (INIS)

James, N K; Lafont, U; Van der Zwaag, S; Groen, W A

2014-01-01

Piezoelectric ceramic–polymer composites with 0–3 connectivity were fabricated using lead zirconium titanate (PZT) powder dispersed in an ionomer (Zn ionomer) and its reference ethylene methacrylic acid copolymer (EMAA) polymer matrix. The PZT–Zn ionomer and PZT–EMAA composites were prepared by melt extrusion followed by hot pressing. The effects of poling conditions such as temperature, time and electric field on the piezoelectric properties of the composites were investigated. The experimentally observed piezoelectric charge coefficient and dielectric constant of the composites were compared with theoretical models. The results show that PZT–Zn ionomer composites have better piezoelectric properties compared to PZT–EMAA composites. The static and fatigue properties of the composites were investigated. The PZT–Zn ionomer composites were found to have excellent fatigue resistance even at strain levels of 4%. Due to the self-healing capabilities of the ionomer matrix, the loss of piezoelectric properties after high strain tensile cyclic loading could be partially recovered by thermal healing. (paper)

Optimization of Sensing and Feedback Control for Vibration/Flutter of Rotating Disk by PZT Actuators via Air Coupled Pressure

Directory of Open Access Journals (Sweden)

Bingfeng Ju

2011-03-01

Full Text Available In this paper, a feedback control mechanism and its optimization for rotating disk vibration/flutter via changes of air-coupled pressure generated using piezoelectric patch actuators are studied. A thin disk rotates in an enclosure, which is equipped with a feedback control loop consisting of a micro-sensor, a signal processor, a power amplifier, and several piezoelectric (PZT actuator patches distributed on the cover of the enclosure. The actuator patches are mounted on the inner or the outer surfaces of the enclosure to produce necessary control force required through the airflow around the disk. The control mechanism for rotating disk flutter using enclosure surfaces bonded with sensors and piezoelectric actuators is thoroughly studied through analytical simulations. The sensor output is used to determine the amount of input to the actuator for controlling the response of the disk in a closed loop configuration. The dynamic stability of the disk-enclosure system, together with the feedback control loop, is analyzed as a complex eigenvalue problem, which is solved using Galerkin’s discretization procedure. The results show that the disk flutter can be reduced effectively with proper configurations of the control gain and the phase shift through the actuations of PZT patches. The effectiveness of different feedback control methods in altering system characteristics and system response has been investigated. The control capability, in terms of control gain, phase shift, and especially the physical configuration of actuator patches, are also evaluated by calculating the complex eigenvalues and the maximum displacement produced by the actuators. To achieve a optimal control performance, sizes, positions and shapes of PZT patches used need to be optimized and such optimization has been achieved through numerical simulations.

Effect Of Electric Field Induced Texture On The Properties Of Piezoelectric Lead Zirconate Titanate

International Nuclear Information System (INIS)

Alkoy, S.

2010-01-01

Texturing a polycrystalline piezoelectric ceramic provide single-crystal like properties without experiencing any difficulties of single crystal growth process. This study reports a method to obtain texture in PbZr 0 .5Ti 0 .5O 3 ceramics by application of an electric field during gelation of a gelcast slurry. Gelcasting provides a means to lock the particles aligned under the application of a high electric field via gelation and this alignment in green body was retained after sintering. Monomer, cross linker and dispersant were dissolved in DI water and PZT powder was dispersed in this premix. Iniator and catalyzer were added to the slurry. An electric field was applied to the slurry for 30 min during gelation. XRD pattern of sintered samples indicates that PZT develops a tetragonal symmetry as a result of E-field applied during gelation. Dielectric constants and piezoelectric d 3 3 coefficients along and perpendicular to E-field are 1070 and 450 and 390 and 280 pC/N, respectively.

Output characteristics of piezoelectric lead zirconate titanate detector using high-energy heavy-ion beam

International Nuclear Information System (INIS)

Takechi, Seiji; Sekiguchi, Masahiro; Miyachi, Takashi; Kobayashi, Masanori; Hattori, Maki; Okudaira, Osamu; Shibata, Hiromi; Fujii, Masayuki; Okada, Nagaya; Murakami, Takeshi; Uchihori, Yukio

2014-01-01

A radiation detector fabricated using piezoelectric lead zirconate titanate (PZT) has been studied by irradiating it with a 400 MeV/n xenon (Xe) beam. The beam diameter was controlled to change the irradiation conditions. It was found that the magnitude of the output observed from the PZT detector may be related to the number of Xe ions per unit area per unit time within the limits of the experimental conditions. -- Highlights: • The performance of PZT detector was studied by irradiation of a 400 MeV/n Xe beam. • The beam diameter was controlled to change the irradiation conditions. • By the control, the number of Xe ions per one pulse was changed from ∼500 to ∼1500. • The output of the PZT detector was not always larger with more intense beam. • The energy of Xe ions per unit area per unit time may determine the output

Piezoelectric and ferroelectric properties of lead-free niobium-rich potassium lithium tantalate niobate single crystals

Energy Technology Data Exchange (ETDEWEB)

Li, Jun, E-mail: lijuna@hit.edu.cn [Department of Physics, Harbin Institute of Technology, Harbin 150001 (China); Li, Yang [Department of chemistry, Harbin Institute of Technology, Harbin 150001 (China); Zhou, Zhongxiang [Department of Physics, Harbin Institute of Technology, Harbin 150001 (China); Guo, Ruyan; Bhalla, Amar S. [Multifunctional Electronic Materials and Device Research Lab, Department of Electrical and Computer Engineering, The University of Texas at San Antonio, San Antonio 78249 (United States)

2014-01-01

Graphical abstract: - Highlights: • Lead-free K{sub 0.95}Li{sub 0.05}Ta{sub 1−x}Nb{sub x}O{sub 3} single crystals were grown using the top-seeded melt growth method. • The piezoelectric and ferroelectric properties of as-grown crystals were systematically investigated. • The piezoelectric properties are very attractive, e.g. for x = 0.60 composition, k{sub t} ≈ 70%, k{sub 31} ≈ 70%, k{sub 33} ≈ 77%, d{sub 31} ≈ 230 pC/N, d{sub 33} ≈ 600 pC/N. • The coercive fields of P–E hysteresis loops are quite small, about or less than 1 kV/mm. - Abstract: Lead-free potassium lithium tantalate niobate single crystals with the composition of K{sub 0.95}Li{sub 0.05}Ta{sub 1−x}Nb{sub x}O{sub 3} (abbreviated as KLTN, x = 0.51, 0.60, 0.69, 0.78) were grown using the top-seeded melt growth method. Their piezoelectric and ferroelectric properties in as-grown crystals have been systematically investigated. The phase transitions and Curie temperatures were determined from dielectric and pyroelectric measurements. Piezoelectric coefficients and electromechanical coupling factors in thickness mode, length-extensional mode and longitudinal mode were obtained. The piezoelectric properties are very attractive, e.g. for x = 0.60 composition, k{sub t} ≈ 70%, k{sub 31} ≈ 70%, k{sub 33} ≈ 77%, d{sub 31} ≈ 230 pC/N, d{sub 33} ≈ 600 pC/N are comparable to the lead-based PZT composition. The polarization versus electric field hysteresis loops show saturated shapes. In short, lead-free niobium-rich KLTN system possesses comparable properties to those in important lead-based piezoelectric material nowadays.

Imprint behavior of piezoelectric PZT thin films deposited onto Cu-coated polymer substrates

Czech Academy of Sciences Publication Activity Database

Suchaneck, G.; Hubička, Zdeněk; Čada, Martin; Kiselev, D.A.; Bdikin, I.; Levin, A.A.; Jastrabík, Lubomír; Kholkin, A. L.; Gerlach, G.; Dejneka, Alexandr

2011-01-01

Roč. 419, č. 1 (2011), s. 103-108 ISSN 0015-0193 R&D Projects: GA ČR GC202/09/J017; GA AV ČR KAN301370701 Institutional research plan: CEZ:AV0Z10100522 Keywords : plasma deposition * PZT * imprint * piezoresponse force microscopy Subject RIV: BH - Optics, Masers, Lasers Impact factor: 0.391, year: 2011

Hydrothermally synthesized PZT film grown in highly concentrated KOH solution with large electromechanical coupling coefficient for resonator

Science.gov (United States)

Feng, Guo-Hua; Lee, Kuan-Yi

2017-12-01

This paper presents a study of lead zirconate titanate (PZT) films hydrothermally grown on a dome-shaped titanium diaphragm. Few articles in the literature address the implementation of hydrothermal PZT films on curved-diaphragm substrates for resonators. In this study, a 50-μm-thick titanium sheet is embossed using balls of designed dimensions to shape a dome-shaped cavity array. Through single-process hydrothermal synthesis, PZT films are grown on both sides of the processed titanium diaphragm with good adhesion and uniformity. The hydrothermal synthesis process involves a high concentration of potassium hydroxide solution and excess amounts of lead acetate and zirconium oxychloride octahydrate. Varied deposition times and temperatures of PZT films are investigated. The grown films are characterized by X-ray diffraction and scanning electron microscopy. The 10-μm-thick PZT dome-shaped resonators with 60- and 20-μm-thick supporting layers are implemented and further tested. Results for both resonators indicate that large electromechanical coupling coefficients and a series resonance of 95 MHz from 14 MHz can be attained. The device is connected to a complementary metal-oxide-semiconductor integrated circuit for analysis of oscillator applications. The oscillator reaches a Q value of 6300 in air. The resonator exhibits a better sensing stability when loaded with water when compared with air.

Ferroelectric and Piezoelectric properties of (111) oriented lanthanum modified lead zirconate titanate film

Energy Technology Data Exchange (ETDEWEB)

Dutta, Soma, E-mail: som@nal.res.in; Antony Jeyaseelan, A.; Sruthi, S.

2014-07-01

Lanthanum modified lead zirconate titanate (PLZT) thick film with molecular formula of Pb{sub 0.92}La{sub 0.08}(Zr{sub 0.52}Ti{sub 0.48}){sub 0.98}O{sub 3} was grown preferentially along (111) direction on Pt/SiO{sub 2}/Si (platinum/silicon oxide/silicon) substrate by spin coating of chemical solution. The directional growth of the film was facilitated by platinum (Pt) (111) template and rapid thermal annealing. X-ray diffraction pattern and atomic force microscopy revealed the preferential growth of the PLZT film. The film was characterized for ferroelectric and detailed piezoelectric properties in a parallel plate capacitor (metal–PLZT–metal) configuration. Ferroelectric characterization of the film showed saturated hysteresis loop with remanent polarization and coercive electric field values of 10.14 μC/cm{sup 2} and 42 kV/cm, respectively, at an applied field of 300 kV/cm. Longitudinal piezoelectric coefficient (d{sub 33,f}) was measured by employing converse piezoelectric effect where electrical charge response and displacement were measured with electrical voltage excitation on the sample electrodes. The effective transverse piezoelectric coefficient (e{sub 31,f}) was derived from charge measurement with an applied mechanical excitation strain by using the four point bending method. d{sub 33,f} and e{sub 31,f} coefficients of PLZT films were found to be 380 pm/V and − 0.831 C/m{sup 2} respectively. - Highlights: • PLZT (111) film is prepared by spin coating of chemical sol on Pt (111) template. • Piezoelectric d{sub 33} value (380 pm/V) of PLZT film is found 20% higher than PZT. • Transverse piezocoefficient e{sub 31,f} of PLZT film is reported for the first time.

Characterization of Bi and Fe co-doped PZT capacitors for FeRAM.

Science.gov (United States)

Cross, Jeffrey S; Kim, Seung-Hyun; Wada, Satoshi; Chatterjee, Abhijit

2010-08-01

Ferroelectric random access memory (FeRAM) has been in mass production for over 15 years. Higher polarization ferroelectric materials are needed for future devices which can operate above about 100 °C. With this goal in mind, co-doping of thin Pb(Zr 40 ,Ti 60 )O 3 (PZT) films with 1 at.% Bi and 1 at.% Fe was examined in order to enhance the ferroelectric properties as well as characterize the doped material. The XRD patterns of PZT-5% BiFeO 3 (BF) and PZT 140-nm thick films showed (111) orientation on (111) platinized Si wafers and a 30 °C increase in the tetragonal to cubic phase transition temperature, often called the Curie temperature, from 350 to 380 °C with co-doping, indicating that Bi and Fe are substituting into the PZT lattice. Raman spectra revealed decreased band intensity with Bi and Fe co-doping of PZT compared to PZT. Polarization hysteresis loops show similar values of remanent polarization, but square-shaped voltage pulse-measured net polarization values of PZT-BF were higher and showed higher endurance to repeated cycling up to 10 10 cycles. It is proposed that Bi and Fe are both in the +3 oxidation state and substituting into the perovskite A and B sites, respectively. Substitution of Bi and Fe into the PZT lattice likely creates defect dipoles, which increase the net polarization when measured by the short voltage pulse positive-up-negative-down (PUND) method.

A concept for the development of piezoceramic materials based on lead zirconate titanate (PZT). Part 2; Ein Entwicklungskonzept piezokeramischer Werkstoffe auf der Basis von Bleizirkonattitanat (PZT). Teil 2

Energy Technology Data Exchange (ETDEWEB)

Helke, G. [CeramTec AG, Lauf a.d. Pegnitz (Germany)

2002-07-01

Piezoceramic ceramics based on Lead Zircontate Titanate (PZT) show - within a relatively close Zr/Ti ratio range (close to the ratio 0.5/0.5) - extreme values for remanent polarization P{sub r} and the dielectric coefficient {epsilon}{sub 33}{sup {tau}}/{epsilon}{sub 0} as well as their corresponding piezoelectric coefficients. Remanent polarization P{sub t} can be directly correlated to the structural parameter {delta} (spontaneous deformation) and the domain mobility {eta}. PZT modification results from the substitution of isovalent or heterovalent ions, thereby taking ion radii and valency at the A and B sites of the perovskite-type lattice under consideration. The substitution of specific ions is the process used to develop new piezoceramic materials which is mainly applied to determine the values of specific parameters corresponding to technical requirements. (orig.) [German] Piezoelektrische Keramiken auf der Basis von Bleizirkonattitanat (PZT) weisen in einem relativ engen Bereich des Zr/Ti-Verhaeltnisses (nahe dem Verhaeltnis 0,5/0,5). Extremwerte der remanenten Polarisation P{sub r} und der Dielektrizitaetskonstanten {epsilon}{sub 33}{sup {tau}}/{epsilon}{sub 0} sowie der von ihnen abhaengigen piezoelektrischen Kenngroessen auf. Die remanente Polarisation P{sub r} laesst sich unmittelbar dem Strukturparameter {delta} (spontane Deformation) und der Domaenenbeweglichkeit {eta} zuordnen. Die Modifikation von PZT erfolgt durch Substitution isovalenter oder heterovalenter Ionen unter Beruecksichtigung von Ionenradien und -wertigkeit auf A- und B-Plaetzen des Perowskigitters. Die Substitution bestimmter Ionen ist das Verfahren zur Schaffung neuer piezokeramischer Werkstoffe und wird insbesondere zur Einstellung der Werte einzelner Kenngroessen auf einem bestimmten Niveau entsprechend den technischen Anforderungen angewendet. (orig.)

A concept for the development of piezoceramic materials based on lead zirconate titanate (PZT). Part 1; Ein Entwicklungskonzept piezokeramischer Werkstoffe auf der Basis von Gleizirkonattitanat (PZT). Teil 1

Energy Technology Data Exchange (ETDEWEB)

Helke, G. [CeramTec AG, Lauf a.d. Pegnitz (Germany)

2002-07-01

Piezoceramic ceramics based on Lead Zircontate Titanate (PZT) show - within a relatively close Zr/Ti ratio range (close to the ratio 0.5/0.5) - extreme values for remanent polarization P{sub r} and the dielectric coefficient {epsilon}{sub 33}{sup {tau}}/{epsilon}{sub 0} as well as their corresponding piezoelectric coefficients. Remanent polarization P{sub t} can be directly correlated to the structural parameter {delta} (spontaneous deformation) and the domain mobility {eta}. PZT modification results from the substitution of isovalent or heterovalent ions, thereby taking ion radii and valency at the A and B sites of the perovskite-type lattice under consideration. The substitution of specific ions is the process used to develop new piezoceramic materials which is mainly applied to determine the values of specific parameters corresponding to technical requirements. (orig.) [German] Piezoelektrische Keramiken auf der Basis von Bleizirkonattitanat (PZT) weisen in einem relativ engen Bereich des Zr/Ti-Verhaeltnisses (nahe dem Verhaeltnis 0,5/0,5). Extremwerte der remanenten Polarisation P{sub r} und der Dielektrizitaetskonstanten {epsilon}{sub 33}{sup {tau}}/{epsilon}{sub 0} sowie der von ihnen abhaengigen piezoelektrischen Kenngroessen auf. Die remanente Polarisation P{sub r} laesst sich unmittelbar dem Strukturparameter {delta} (spontane Deformation) und der Domaenenbeweglichkeit {eta} zuordnen. Die Modifikation von PZT erfolgt durch Substitution isovalenter oder heterovalenter Ionen unter Beruecksichtigung von Ionenradien und -wertigkeit auf A- und B-Plaetzen des Perowskigitters. Die Substitution bestimmter Ionen ist das Verfahren zur Schaffung neuer piezokeramischer Werkstoffe und wird insbesondere zur Einstellung der Werte einzelner Kenngroessen auf einem bestimmten Niveau entsprechend den technischen Anforderungen angewendet. (orig.)

The effect of particle aspect ratio on the electroelastic properties of piezoelectric nanocomposites

International Nuclear Information System (INIS)

Andrews, C; Lin, Y; Sodano, H A

2010-01-01

Piezoelectric materials offer exceptional sensing and actuation properties; however, they are prone to breakage and difficult to apply on curved surfaces in their monolithic form. One method of alleviating these issues is through the use of 0–3 nanocomposites, which are formed by embedding piezoelectric particles into a polymer matrix. Material of this class offers certain advantages over monolithic materials; however, it has seen little use due to its low coupling. Here we develop micromechanics and finite element models to study the electroelastic properties of an active nanocomposite, as a function of the aspect ratio and alignment of the piezoelectric filler. Our results show that the aspect ratio is critical for achieving high electromechanical coupling, and with an increase from 1 to 10 at 30% volume fraction of piezoelectric filler the coupling can increase to 60 times its initial value and achieve a bulk composite coupling as high as 90% for a pure PZT-7A piezoelectric constituent

A T-shape linear piezoelectric motor with single foot.

Science.gov (United States)

Liu, Yingxiang; Chen, Weishan; Yang, Xiaohui; Liu, Junkao

2015-02-01

A new T-shape piezoelectric motor using the hybrid of two orthogonal longitudinal vibrations is proposed in this work. Six pieces of PZT ceramic plates are bonded on the upside and downside surfaces of a T-shape duralumin alloy base respectively to form the proposed motor. Elliptical movement can be generated on the driving tip by applying sine and cosine voltages to the PZT elements. The horizontal displacement of the driving tip will push the runner while the vertical displacement can overcome the preload. Finite element method is used to accomplish the design and analysis process. The resonance frequencies of the two vibration modes are tuned to be close by modal analysis, while the motion trajectory of the driving tip is observed by transient analysis. After the fabrication of a prototype, the vibration characteristics and mechanical output ability are measured. The no-load speed and the maximum output thrust force of the proposed motor are tested to be 718 mm/s and 3.5 N under an exciting frequency of 53.1 kHz. The proposed T-shape piezoelectric motor exhibits merits of simple structure, easy to realize miniaturization, easy to be fabricated, and high power-to-weight ratio. Copyright © 2014 Elsevier B.V. All rights reserved.

Characterization of lead zirconate titanate (PZT)--indium tin oxide (ITO) thin film interface

International Nuclear Information System (INIS)

Sreenivas, K.; Sayer, M.; Laursen, T.; Whitton, J.L.; Pascual, R.; Johnson, D.J.; Amm, D.T.

1990-01-01

In this paper the interface between ultrathin sputtered lead zirconate titanate (PZT) films and a conductive electrode (indium tin oxide-ITO) is investigated. Structural and compositional changes at the PZT-ITO interface have been examined by surface analysis and depth profiling techniques of glancing angle x-ray diffraction, Rutherford backscattering (RBS), SIMS, Auger electron spectroscopy (AES), and elastic recoil detection analysis (ERDA). Studies indicate significant interdiffusion of lead into the underlying ITP layer and glass substrate with a large amount of residual stress at the interface. Influence of such compositional deviations at the interface is correlated to an observed thickness dependence in the dielectric properties of PZT films

Experimental and Theoretical Investigations of the Impact Localization of a Passive Smart Composite Plate Fabricated Using Piezoelectric Materials

Directory of Open Access Journals (Sweden)

M. M. S. Dezfouli

2013-01-01

Full Text Available Two passive smart composite plates are fabricated using one and two PZT patches that are cheaper than the PZT wafer. The composite plate is fabricated in low temperature through the hand lay-up method to avoid PZT patch decoupling and wire spoiling. The locus of the impact point is identified using the output voltage to identify the impact location using one sensor. The output voltages of the sensors are analyzed to identify the impact location using two sensors. The locations of the impacts are determined based on the crossing points of two circles and the origin of an intended Cartesian coordinate system that is concentric with one of the sensors. This study proposes the impact location identification of the passive smart composite using the low-cost PZT patch PIC155 instead of common embedded materials (wafer and element piezoelectric.

Thickness-dependent piezoelectric behaviour and dielectric properties of lanthanum modified BiFeO3 thin films

Directory of Open Access Journals (Sweden)

Glenda Biasotto

2011-03-01

Full Text Available Bi0.85La0.15FeO3 (BLFO thin films were deposited on Pt(111/Ti/SiO2 /Si substrates by the soft chemical method. Films with thicknesses ranging from 140 to 280 nm were grown on platinum coated silicon substrates at 500°C for 2 hours. The X-ray diffraction analysis of BLFO films evidenced a hexagonal structure over the entire thickness range investigated. The grain size of the film changes as the number of the layers increases, indicating thickness dependence. It is found that the piezoelectric response is strongly influenced by the film thickness. It is shown that the properties of BiFeO3 thin films, such as lattice parameter, dielectric permittivity, piezoeletric coefficient etc., are functions of misfit strains.

The effects of embedded piezoelectric fiber composite sensors on the structural integrity of glass-fiber–epoxy composite laminate

International Nuclear Information System (INIS)

Konka, Hari P; Wahab, M A; Lian, K

2012-01-01

Piezoelectric fiber composite sensors (PFCSs) made from micro-sized lead zirconate titanate (PZT) fibers have many advantages over the traditional bulk PZT sensors for embedded sensor applications. PFCSs as embedded sensors will be an ideal choice to continuously monitor the stress/strain levels and health conditions of composite structures. PFCSs are highly flexible, easily embeddable, have high compatibility with composite structures, and also provides manufacturing flexibility. This research is focused on examining the effects of embedding PFCS sensors (macro-fiber composite (MFC) and piezoelectric fiber composite (PFC)) on the structural integrity of glass-fiber–epoxy composite laminates. The strengths of composite materials with embedded PFCSs and conventional PZT sensors were compared, and the advantages of PFCS sensors over PZTs were demonstrated. Initially a numerical simulation study is performed to understand the local stress/strain field near the embedded sensor region inside a composite specimen. High stress concentration regions were observed near the embedded sensor corner edge. Using PFCS leads to a reduction of 56% in longitudinal stress concentration and 38% in transverse stress concentration, when compared to using the conventional PZTs as embedded sensors. In-plane tensile, in-plane tension–tension fatigue, and short beam strength tests are performed to evaluate the strengths/behavior of the composite specimens containing embedded PFCS. From the tensile test it is observed that embedding PFCS and PZT sensors in the composite structures leads to a reduction in ultimate strength by 3 and 6% respectively. From the fatigue test results it is concluded that both embedded PFCS and PZT sensors do not have a significant effect on the fatigue behavior of the composite specimens. From the short beam strength test it is found that embedding PFCS and PZT sensors leads to a reduction in shear strength by 7 and 15% respectively. Overall the pure PZT

The effects of embedded piezoelectric fiber composite sensors on the structural integrity of glass-fiber-epoxy composite laminate

Science.gov (United States)

Konka, Hari P.; Wahab, M. A.; Lian, K.

2012-01-01

Piezoelectric fiber composite sensors (PFCSs) made from micro-sized lead zirconate titanate (PZT) fibers have many advantages over the traditional bulk PZT sensors for embedded sensor applications. PFCSs as embedded sensors will be an ideal choice to continuously monitor the stress/strain levels and health conditions of composite structures. PFCSs are highly flexible, easily embeddable, have high compatibility with composite structures, and also provides manufacturing flexibility. This research is focused on examining the effects of embedding PFCS sensors (macro-fiber composite (MFC) and piezoelectric fiber composite (PFC)) on the structural integrity of glass-fiber-epoxy composite laminates. The strengths of composite materials with embedded PFCSs and conventional PZT sensors were compared, and the advantages of PFCS sensors over PZTs were demonstrated. Initially a numerical simulation study is performed to understand the local stress/strain field near the embedded sensor region inside a composite specimen. High stress concentration regions were observed near the embedded sensor corner edge. Using PFCS leads to a reduction of 56% in longitudinal stress concentration and 38% in transverse stress concentration, when compared to using the conventional PZTs as embedded sensors. In-plane tensile, in-plane tension-tension fatigue, and short beam strength tests are performed to evaluate the strengths/behavior of the composite specimens containing embedded PFCS. From the tensile test it is observed that embedding PFCS and PZT sensors in the composite structures leads to a reduction in ultimate strength by 3 and 6% respectively. From the fatigue test results it is concluded that both embedded PFCS and PZT sensors do not have a significant effect on the fatigue behavior of the composite specimens. From the short beam strength test it is found that embedding PFCS and PZT sensors leads to a reduction in shear strength by 7 and 15% respectively. Overall the pure PZT sensors

Computational and Experimental Insight Into Single-Molecule Piezoelectric Materials

Science.gov (United States)

Marvin, Christopher Wayne

Piezoelectric materials allow for the harvesting of ambient waste energy from the environment. Producing lightweight, highly responsive materials is a challenge for this type of material, requiring polymer, foam, or bio-inspired materials. In this dissertation, I explore the origin of the piezoelectric effect in single molecules through density functional theory (DFT), analyze the piezoresponse of bio-inspired peptidic materials through the use of atomic and piezoresponse force microscopy (AFM and PFM), and develop a novel class of materials combining flexible polyurethane foams and non-piezoelectric, polar dopants. For the DFT calculations, functional group, regiochemical, and heteroatom derivatives of [6]helicene were examined for their influence on the piezoelectric response. An aza[6]helicene derivative was found to have a piezoelectric response (108 pm/V) comparable to ceramics such as lead zirconium titanate (200+ pm/V). These computed materials have the possibility to compete with current field-leading piezomaterials such as lead zirconium titanate (PZT), zinc oxide (ZnO), and polyvinylidene difluoride (PVDF) and its derivatives. The use of AFM/PFM allows for the demonstration of the piezoelectric effect of the selfassembled monolayer (SAM) peptidic systems. Through PFM, the influence that the helicity and sequence of the peptide has on the overall response of the molecule can be analyzed. Finally, development of a novel class of piezoelectrics, the foam-based materials, expands the current understanding of the qualities required for a piezoelectric material from ceramic and rigid materials to more flexible, organic materials. Through the exploration of these novel types of piezoelectric materials, new design rules and figures of merit have been developed.

Synthesis and mechanical characterization of PZT/Sr based composite ceramics with addition of Si{sub 3}N{sub 4}; Sintese e caracterizacao mecanica de ceramicas compositas a base de PZT/Sr com adicoes de Si{sub 3}N{sub 4}

Energy Technology Data Exchange (ETDEWEB)

Santos, M.A.P.; Santos, R.C.P.; Santos, M.C.C.; Rocha, C.D.G.; Silva, M., E-mail: cida@ipqm.mar.mil.b [Instituto de Pesquisas da Marinha (IPqM), Ilha do Governador, RJ (Brazil). Grupo de Materiais

2010-07-01

In the Underwater Acoustics field, piezoelectric ceramics are the most usually employed materials for the conversion of mechanical energy (acoustic signal) into electric energy (electric signal) and vice-versa, in sensors (hydrophones) or hydroacoustic projectors. In the development of new compositions for these applications, piezoelectric performance is generally prioritized, to the expense of its mechanical properties. With this in mind, the object of this work was to study the effects of the addition of Si{sub 3}N{sub 4} in the mechanical properties of PZT-Sr based electronic ceramics. Thus, a novel piezoelectric ceramic with the addition of small percentages in weight (0;0.1;1;3 and 5) of the structural ceramic Si{sub 3}N{sub 4} was successfully processed by the oxide mixing route ; the compounds were sintered in a conventional at 1200 deg C for 2h. The densities of the compounds thus obtained for the different percentages of Si{sub 3}N{sub 4} ranged from 55 to 97% and decreased with the increase of the content of Si{sub 3}N{sub 4}. Presence of equiaxial grains with normal growth was observed in all samples. MEV/EDS analysis of the micro-structures of the compositions detected the presence of a second phase rich in Zr, confirmed by DRX, which is a result of large quantities of volatilized PbO; the sintered pieces had their mechanical properties investigated by ultra-sonic inspection. It was observed that, among the sintered compositions, the PZT-Sr ceramic with 0.1% Si{sub 3}N{sub 4} presented the smallest value for Young's Modulus E and Shear Modulus G, 75 Gpa and 28 Gpa, respectively. The Poisson's Coefficients {nu} tended to decrease with the increase of Si{sub 3}N{sub 4} added to the PZT-Sr ceramic, indicating, thus, that the added compound may be used to adjust the mechanical properties of the material. (author)

Structural Damage Identification in Stiffened Plate Fatigue Specimens Using Piezoelectric Active Sensing

Science.gov (United States)

2011-09-01

isolated AO mode first arrival, recorded at PZT 2, is shown at 3 different fatigue levels. Figure 5. The area under the PSD curve, calculated twice...Structural Damage Identification in Stiffened Plate Fatigue Specimens Using Piezoelectric Active Sensing B. L. GRISSO, G. PARK, L. W. SALVINO...with several challenges including limited performance knowledge of the materials, aluminum sensitization, structural fatigue performance, and

Finite element analysis of vibration energy harvesting using lead-free piezoelectric materials: A comparative study

Directory of Open Access Journals (Sweden)

Anuruddh Kumar

2014-06-01

Full Text Available In this article, the performance of various piezoelectric materials is simulated for the unimorph cantilever-type piezoelectric energy harvester. The finite element method (FEM is used to model the piezolaminated unimorph cantilever structure. The first-order shear deformation theory (FSDT and linear piezoelectric theory are implemented in finite element simulations. The genetic algorithm (GA optimization approach is carried out to optimize the structural parameters of mechanical energy-based energy harvester for maximum power density and power output. The numerical simulation demonstrates the performance of lead-free piezoelectric materials in unimorph cantilever-based energy harvester. The lead-free piezoelectric material K0.5Na0.5NbO3-LiSbO3-CaTiO3 (2 wt.% has demonstrated maximum mean power and maximum mean power density for piezoelectric energy harvester in the ambient frequency range of 90–110 Hz. Overall, the lead-free piezoelectric materials of K0.5Na0.5NbO3-LiSbO3 (KNN-LS family have shown better performance than the conventional lead-based piezoelectric material lead zirconate titanate (PZT in the context of piezoelectric energy harvesting devices.

Cross-sectional analysis of ferroelectric domains in PZT capacitors via piezoresponse force microscopy

Energy Technology Data Exchange (ETDEWEB)

Liu, J S [School of Materials Science and Engineering, Southwest University of Science and Technology, Mianyang City (China); Zeng, H Z [State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054 (China); Kholkin, A L [Department of Ceramic and Glass Engineering and CICECO, University of Aveiro, Aveiro 3810-193 (Portugal)

2007-11-21

Ferroelectric domains have been investigated on the cross-section of Pb(Zr{sub 0.55}Ti{sub 0.45})O{sub 3} (PZT) thin film capacitors by scanning probe microscopy. The static domain images on the cross-section were obtained by the lateral piezoresponse force microscopy (LPFM) method, in which the ac voltage used to induce the converse piezoelectric effect was applied between the conductive tip and the bottom electrode. The polarization component normal to the substrate could be characterized via both d{sub 33} and d{sub 15} piezoelectric coefficients, which resulted in a high resolution of LPFM images. After a variable dc bias was applied between the top and the bottom electrodes, the variations of domain image on the cross-section were recorded by the LPFM immediately. Upon the application of low bias, new domain sites appeared near the PZT/Pt interface opposite to the initial polarization. Forward stretch of new domains was facilitated under the dc field approaching the coercive field E{sub c}. Under a very high field (about three times of the E{sub c}), the sidewise expansion of columnar domains was observed. However, the domains were only partially switched even though a very high field was applied. The observed domain growth process indicated a lower energy barrier for nucleation compared with that of domain wall motion. Possible reasons for the incomplete switching are the substantial influences of the interface and depolarization in thin film capacitors.

Piezoelectric Materials Under Natural and Man-Made Radiation: The Potential for Direct Radiation Detection

Science.gov (United States)

Wart, Megan; Simpson, Evan; Flaska, Marek

2018-01-01

Radiation detection systems used for monitoring long term waste storage need to be compact, rugged, and have low or no power requirements. By using piezoelectric materials it may be possible to create a reliable self-powered radiation detection system. To determine the feasibility of this approach, the electrical signal response of the piezoelectric materials to radiation must be characterized. To do so, an experimental geometry has been designed and a neutron source has been chosen as described in this paper, which will be used to irradiate a uranium foil for producing fission fragments. These future experiments will be aimed at finding the threshold of exposure of lead zirconate titanate (PZT) plates needed to produce and electrical signal. Based on the proposed experimental geometry the thermal neutron beam-line at the Breazeale Reactor at The Pennsylvania State University will be used as the neutron source. The uranium foil and neutron source will be able to supply a maximum flux of 1.5e5 fission fragments/second*cm2 to each of the PZT plates.

Piezoelectric Materials Under Natural and Man-Made Radiation: The Potential for Direct Radiation Detection

Directory of Open Access Journals (Sweden)

Wart Megan

2018-01-01

Full Text Available Radiation detection systems used for monitoring long term waste storage need to be compact, rugged, and have low or no power requirements. By using piezoelectric materials it may be possible to create a reliable self-powered radiation detection system. To determine the feasibility of this approach, the electrical signal response of the piezoelectric materials to radiation must be characterized. To do so, an experimental geometry has been designed and a neutron source has been chosen as described in this paper, which will be used to irradiate a uranium foil for producing fission fragments. These future experiments will be aimed at finding the threshold of exposure of lead zirconate titanate (PZT plates needed to produce and electrical signal. Based on the proposed experimental geometry the thermal neutron beam-line at the Breazeale Reactor at The Pennsylvania State University will be used as the neutron source. The uranium foil and neutron source will be able to supply a maximum flux of 1.5e5 fission fragments/second*cm2 to each of the PZT plates.

A digital output piezoelectric accelerometer using a Pb(Zr, Ti)O3 thin film array electrically connected in series

International Nuclear Information System (INIS)

Kobayashi, T; Okada, H; Maeda, R; Itoh, T; Masuda, T

2010-01-01

A digital output piezoelectric accelerometer is proposed to realize an ultra-low power consumption wireless sensor node. The accelerometer has patterned piezoelectric thin films (piezoelectric plates) electrically connected in series accompanied by CMOS switches at the end of some of the piezoelectric plates. The connected piezoelectric plates amplify the output voltage without the use of amplifiers. The CMOS switches turn on when the output voltage of the piezoelectric plates is higher than the CMOS threshold voltage. The piezoelectric accelerometer converts the acceleration into a number of on-state CMOS switches, which can be called the digital output. The proposed digital output piezoelectric accelerometer, using Pb(Zr, Ti)O 3 (PZT) thin films as the piezoelectric material, was fabricated through a microelectromechanical system (MEMS) microfabrication process. The output voltage was found to be amplified by the number of connected piezoelectric plates. The DC output voltage obtained by using an AC to DC conversion circuit is proportional to the number of connections. The results show the potential for realizing the proposed digital output piezoelectric accelerometer

Ga+ implantation in a PZT film during focused ion beam micro-machining

International Nuclear Information System (INIS)

Wollschlaeger, Nicole; Oesterle, Werner; Haeusler, Ines; Stewart, Mark

2015-01-01

The objective of the present work was to study the impact of Focused Ion Beam (FIB) machining parameters on the thickness of the damaged layer within a thin film PZT. Therefore, different Ga + - ion doses and ion energies were applied to a standard PZT film (80/20 lead zirconium titanate) under two beam incidence angles (90 and 1 ). The thicknesses of the corresponding Ga + -implanted layers were then determined by cross-sectional TEM in combination with energy dispersive spectroscopic (EDS) line-scans and correlated with polarisation hysteresis loops. The results show a decrease of Ga + -implanted layer thickness with decreasing inclination angle, whereas ion energy and ion dose could be correlated with gallium concentration in the implanted layers. Under the most unfavorable conditions the depth of the affected zone was 26 nm, it was only 2 nm for the most favorable conditions. (copyright 2015 WILEY-VCH Verlag GmbH and Co. KGaA, Weinheim) (orig.)

A Piezoelectric MEMS Microphone Based on Lead Zirconate Titanate (PZT) Thim Films

National Research Council Canada - National Science Library

Polcawich, Ronald

2004-01-01

.... A piezoelectric-based microphone can provide a solution to these requirements, since it offers the ability to passively sense without the power requirements of condenser or piezoresistive microphone counterparts...

Radial-Electric-Field Piezoelectric Diaphragm Pumps

Science.gov (United States)

Bryant, Robert G.; Working, Dennis C.; Mossi, Karla; Castro, Nicholas D.; Mane, Pooma

2009-01-01

In a recently invented class of piezoelectric diaphragm pumps, the electrode patterns on the piezoelectric diaphragms are configured so that the electric fields in the diaphragms have symmetrical radial (along-the-surface) components in addition to through-the-thickness components. Previously, it was accepted in the piezoelectric-transducer art that in order to produce the out-of-plane bending displacement of a diaphragm needed for pumping, one must make the electric field asymmetrical through the thickness, typically by means of electrodes placed on only one side of the piezoelectric material. In the present invention, electrodes are placed on both sides and patterned so as to produce substantial radial as well as through-the-thickness components. Moreover, unlike in the prior art, the electric field can be symmetrical through the thickness. Tests have shown in a given diaphragm that an electrode configuration according to this invention produces more displacement than does a conventional one-sided electrode pattern. The invention admits of numerous variations characterized by various degrees of complexity. Figure 1 is a simplified depiction of a basic version. As in other piezoelectric diaphragm pumps of similar basic design, the prime mover is a piezoelectric diaphragm. Application of a suitable voltage to the electrodes on the diaphragm causes it to undergo out-of-plane bending. The bending displacement pushes a fluid out of, or pulls the fluid into, a chamber bounded partly by the diaphragm. Also as in other diaphragm pumps in general, check valves ensure that the fluid flows only in through one port and only out through another port.

Structural Health Monitoring of a Composite Panel Based on PZT Sensors and a Transfer Impedance Framework.

Science.gov (United States)

Dziendzikowski, Michal; Niedbala, Patryk; Kurnyta, Artur; Kowalczyk, Kamil; Dragan, Krzysztof

2018-05-11

One of the ideas for development of Structural Health Monitoring (SHM) systems is based on excitation of elastic waves by a network of PZT piezoelectric transducers integrated with the structure. In the paper, a variant of the so-called Transfer Impedance (TI) approach to SHM is followed. Signal characteristics, called the Damage Indices (DIs), were proposed for data presentation and analysis. The idea underlying the definition of DIs was to maintain most of the information carried by the voltage induced on PZT sensors by elastic waves. In particular, the DIs proposed in the paper should be sensitive to all types of damage which can influence the amplitude or the phase of the voltage induced on the sensor. Properties of the proposed DIs were investigated experimentally using a GFRP composite panel equipped with PZT networks attached to its surface and embedded into its internal structure. Repeatability and stability of DI indications under controlled conditions were verified in tests. Also, some performance indicators for surface-attached and structure-embedded sensors were obtained. The DIs' behavior was dependent mostly on the presence of a simulated damage in the structure. Anisotropy of mechanical properties of the specimen, geometrical properties of PZT network as well as, to some extent, the technology of sensor integration with the structure were irrelevant for damage indication. This property enables the method to be used for damage detection and classification.

PZT guided waves sensor permanently attached on multi-wire AWG12 cables used as communication medium

Science.gov (United States)

Trane, Gianpiero; Mijarez, Rito; Guevara, Ricardo; Baltazar, Arturo

2015-03-01

Guided waves in solid media have been used in structural health monitoring (SHM) and non-destructive testing (NDT) applications due to their mechanical propagation properties. In this context, guided waves communications offer the reuse of infrastructure as communication channel, in which the guided waves work as the information carrying signals. This study presents the proprietary design and implementation of a piezoelectric (PZT) sensor for the transmission and reception of guided waves that uses a multiple-wire AWG12 cable, commonly used in electric domestic and industrial applications, as a communication channel. The design involves electrical/mechanical coupling, electric isolation, instrumentation and casing. The PZT guided waves transmitter instrumentation includes a microcontroller-based pulse position modulator (PPM), a signal booster, a PZT crystal and a 9 V battery. Dispersion curves of the cable and dynamical linear 3D finite element (FE) models of the sensor were performed to substantiate the proper frequency selection. To evaluate the transmitter design, a receiver instrumentation package made of a PZT crystal, an amplifier and a commercial data acquisition module connected to a personal computer was implemented. Experimental tests were conducted in the laboratory using 1 m and 4 m AWG12 cables. Results showed that, although there was significant dispersion and multiple mode excitations of the transmitted pulses, the system correctly identified 10-bit frames of guided wave PPM encoded information.

Giant energy density in [001]-textured Pb(Mg1/3Nb2/3)O3-PbZrO3-PbTiO3 piezoelectric ceramics

Science.gov (United States)

Yan, Yongke; Cho, Kyung-Hoon; Maurya, Deepam; Kumar, Amit; Kalinin, Sergei; Khachaturyan, Armen; Priya, Shashank

2013-01-01

Pb(Zr,Ti)O3 (PZT) based compositions have been challenging to texture or grow in a single crystal form due to the incongruent melting point of ZrO2. Here we demonstrate the method for achieving 90% textured PZT-based ceramics and further show that it can provide highest known energy density in piezoelectric materials through enhancement of piezoelectric charge and voltage coefficients (d and g). Our method provides more than ˜5× increase in the ratio d(textured)/d(random). A giant magnitude of d.g coefficient with value of 59 000 × 10-15 m2 N-1 (comparable to that of the single crystal counterpart and 359% higher than that of the best commercial compositions) was obtained.

Periodical Microstructures Based on Novel Piezoelectric Material for Biomedical Applications

Directory of Open Access Journals (Sweden)

Giedrius Janusas

2015-12-01

Full Text Available A novel cantilever type piezoelectric sensing element was developed. Cost-effective and simple fabrication design allows the use of this element for various applications in the areas of biomedicine, pharmacy, environmental analysis and biosensing. This paper proposes a novel piezoelectric composite material whose basic element is PZT and a sensing platform where this material was integrated. Results showed that a designed novel cantilever-type element is able to generate a voltage of up to 80 µV at 50 Hz frequency. To use this element for sensing purposes, a four micron periodical microstructure was imprinted. Silver nanoparticles were precipitated on the grating to increase the sensitivity of the designed element, i.e., Surface Plasmon Resonance (SPR effect appears in the element. To tackle some issues (a lack of sensitivity, signal delays the element must have certain electronic and optical properties. One possible solution, proposed in this paper, is a combination of piezoelectricity and SPR in a single element.

High-Power Piezoelectric Vibration Characteristics of Textured SrBi2Nb2O9 Ceramics

Science.gov (United States)

Kawada, Shinichiro; Ogawa, Hirozumi; Kimura, Masahiko; Shiratsuyu, Kosuke; Niimi, Hideaki

2006-09-01

The high-power piezoelectric vibration characteristics of textured SrBi2Nb2O9 (SBN) ceramics, that is bismuth-layer-structured ferroelectrics, were studied in the longitudinal mode (33-mode) by constant current driving method and compared with those of ordinary randomly oriented SBN and widely used Pb(Ti,Zr)O3 (PZT) ceramics. In the case of textured SBN ceramics, resonant properties are stable up to a vibration velocity of 2.6 m/s. Vibration velocity at resonant frequency increases proportionally with the applied electric field, and resonant frequency is almost constant in high-vibration-velocity driving. On the other hand, in the case of randomly oriented SBN and PZT ceramics, the increase in vibration velocity is not proportional to the applied high electric field, and resonant frequency decreases with increasing vibration velocity. The resonant sharpness Q of textured SBN ceramics is about 2000, even at a vibration velocity of 2.6 m/s. Therefore, textured SBN ceramics are good candidates for high-power piezoelectric applications.

Energy harvesting from vibration using a piezoelectric membrane

Energy Technology Data Exchange (ETDEWEB)

Ericka, M.; Vasic, D.; Costa, F.; Tliba, S. [Ecole Normale Superieure de Cachan, Systemes et Applications des Technologies de l' Information et de l' Energie (SATIE, UMR 8029), 94 - Cachan (France); Poulin, G. [Ecole Nationale Superieure d' Ingenieurs Electriciens de Grenoble, Laboratoire d' Automatique de Grenoble, 38 (France)

2005-09-01

In this paper we investigate the capability of harvesting the electric energy from mechanical vibrations in a dynamic environment through a piezoelectric membrane transducer. This transducer consists of 2 layers lead zirconate titanate (PZT)/brass, the brass layer is embedded over the whole circumference by epoxy adhesive. A very small vibration gives a consequent deformation of the membrane which generates electric energy. Due to the impedance matrices connecting the efforts and flows of the membrane, we have established the dynamic electric equivalent circuit of the transducer. In a first study and in order to validate theoretical results, we performed experiments with a vibrating machine moving a macroscopic 25 mm diameter piezoelectric membrane. A power of 1.8 mW was generated at the resonance frequency (2.58 kHz) across a 56 k{omega} optimal resistor and for a 2 g acceleration. (authors)

Physical properties of inorganic PMW-PNN-PZT ceramics

Science.gov (United States)

Sin, Sang-Hoon; Yoo, Ju-hyun; Kim, Yong-Jin; Baek, Sam-ki; Ha, Jun-Soo; No, Chung-Han; Song, Hyun-Seon; Shin, Dong-Chan

2015-07-01

In this work, inorganic Pb(Mg1/2W1/2)0.03(Ni1/3Nb2/3)x(Zr0.5Ti0.5)0.97-xO3 (x = 0.02 ∼ 0.12) composition ceramics were fabricated by the conventional solid state reaction method. And then their micro structure and ferroelectric properties were investigated according to the amount of PNN substitution. Small amounts of Li2CO3 and CaCO3 were used in order to decrease the sintering temperature of the ceramics. The 0.10 mol PNN-substituted PMW-PNN- PZT ceramics sintered at 920°C showed the excellent physical properties of piezoelectric constant (d33), electromechanical coupling factor (kp), mechanical quality coefficient (Qm), and dielectric constant of 566 pC/N, 0.61, 73, and 2183, respectively.

Note: Resonance magnetoelectric interactions in laminate of FeCuNbSiB and multilayer piezoelectric stack for magnetic sensor

Science.gov (United States)

Li, Jianqiang; Lu, Caijiang; Xu, Changbao; Zhong, Ming

2015-09-01

This paper develops a simple miniature magnetoelectric (ME) laminate FeCuNbSiB/PZT-stack made up of magnetostrictive Fe73.5Cu1Nb3Si13.5B9 (FeCuNbSiB) foils and piezoelectric Pb(Zr, Ti)O3 (PZT) multilayer stack vibrator. Resonant ME interactions of FeCuNbSiB/PZT-stack with different layers of FeCuNbSiB foil (L) are investigated in detail. The experimental results show that the ME voltage coefficient reaches maximum value of 141.5 (V/cm Oe) for FeCuNbSiB/PZT-stack with L = 6. The AC-magnetic sensitivities can reach 524.29 mV/Oe and 1.8 mV/Oe under resonance 91.6 kHz and off-resonance 1 kHz, respectively. The FeCuNbSiB/PZT-stack can distinguish small dc-magnetic field of ˜9 nT. The results indicate that the proposed ME composites are very promising for the cheap room-temperature magnetic field sensing technology.

Fabrication of microstructures in aviation components with a femtosecond laser based on PZT scanning

International Nuclear Information System (INIS)

Yang, Xiaojun; Zhao, Wei; Li, Ming; Yang, Yong; Cheng, Guanghua; Zhao, Hualong; Li, Peng; Zhang, Huixing

2013-01-01

Thermal defects and low precision are the main disadvantages of fabricating micro-holes, irregular holes, and micro-slots in thermostable aviation materials. We demonstrate a manufacturing method employing a femtosecond laser and piezoelectric ceramic (PZT). The production process parameters were optimized according to the metallographic and dimensional accuracy of the microstructure, which was measured by phase-contrast microscopy and scanning electron microscopy. The limitations in a conventional aeroengine, such as in the recast layer, recrystallization, and micro-cracks, which degrade the performance and service life, were resolved with a simple, controllable, and commercial method. (paper)

Ga{sup +} implantation in a PZT film during focused ion beam micro-machining

Energy Technology Data Exchange (ETDEWEB)

Wollschlaeger, Nicole; Oesterle, Werner; Haeusler, Ines [Federal Institute for Materials Research and Testing, Unter den Eichen 87, 12205 Berlin (Germany); Stewart, Mark [National Physical Laboratory, Hampton Road, Teddington Middlesex TW 11 0LW (United Kingdom)

2015-03-01

The objective of the present work was to study the impact of Focused Ion Beam (FIB) machining parameters on the thickness of the damaged layer within a thin film PZT. Therefore, different Ga{sup +}- ion doses and ion energies were applied to a standard PZT film (80/20 lead zirconium titanate) under two beam incidence angles (90 and 1 ). The thicknesses of the corresponding Ga{sup +}-implanted layers were then determined by cross-sectional TEM in combination with energy dispersive spectroscopic (EDS) line-scans and correlated with polarisation hysteresis loops. The results show a decrease of Ga{sup +}-implanted layer thickness with decreasing inclination angle, whereas ion energy and ion dose could be correlated with gallium concentration in the implanted layers. Under the most unfavorable conditions the depth of the affected zone was 26 nm, it was only 2 nm for the most favorable conditions. (copyright 2015 WILEY-VCH Verlag GmbH and Co. KGaA, Weinheim) (orig.)

Design, Fabrication, and Modeling of a Novel Dual-Axis Control Input PZT Gyroscope

Directory of Open Access Journals (Sweden)

Cheng-Yang Chang

2017-10-01

Full Text Available Conventional gyroscopes are equipped with a single-axis control input, limiting their performance. Although researchers have proposed control algorithms with dual-axis control inputs to improve gyroscope performance, most have verified the control algorithms through numerical simulations because they lacked practical devices with dual-axis control inputs. The aim of this study was to design a piezoelectric gyroscope equipped with a dual-axis control input so that researchers may experimentally verify those control algorithms in future. Designing a piezoelectric gyroscope with a dual-axis control input is more difficult than designing a conventional gyroscope because the control input must be effective over a broad frequency range to compensate for imperfections, and the multiple mode shapes in flexural deformations complicate the relation between flexural deformation and the proof mass position. This study solved these problems by using a lead zirconate titanate (PZT material, introducing additional electrodes for shielding, developing an optimal electrode pattern, and performing calibrations of undesired couplings. The results indicated that the fabricated device could be operated at 5.5±1 kHz to perform dual-axis actuations and position measurements. The calibration of the fabricated device was completed by system identifications of a new dynamic model including gyroscopic motions, electromechanical coupling, mechanical coupling, electrostatic coupling, and capacitive output impedance. Finally, without the assistance of control algorithms, the “open loop sensitivity” of the fabricated gyroscope was 1.82 μV/deg/s with a nonlinearity of 9.5% full-scale output. This sensitivity is comparable with those of other PZT gyroscopes with single-axis control inputs.

Design, Fabrication, and Modeling of a Novel Dual-Axis Control Input PZT Gyroscope.

Science.gov (United States)

Chang, Cheng-Yang; Chen, Tsung-Lin

2017-10-31

Conventional gyroscopes are equipped with a single-axis control input, limiting their performance. Although researchers have proposed control algorithms with dual-axis control inputs to improve gyroscope performance, most have verified the control algorithms through numerical simulations because they lacked practical devices with dual-axis control inputs. The aim of this study was to design a piezoelectric gyroscope equipped with a dual-axis control input so that researchers may experimentally verify those control algorithms in future. Designing a piezoelectric gyroscope with a dual-axis control input is more difficult than designing a conventional gyroscope because the control input must be effective over a broad frequency range to compensate for imperfections, and the multiple mode shapes in flexural deformations complicate the relation between flexural deformation and the proof mass position. This study solved these problems by using a lead zirconate titanate (PZT) material, introducing additional electrodes for shielding, developing an optimal electrode pattern, and performing calibrations of undesired couplings. The results indicated that the fabricated device could be operated at 5.5±1 kHz to perform dual-axis actuations and position measurements. The calibration of the fabricated device was completed by system identifications of a new dynamic model including gyroscopic motions, electromechanical coupling, mechanical coupling, electrostatic coupling, and capacitive output impedance. Finally, without the assistance of control algorithms, the "open loop sensitivity" of the fabricated gyroscope was 1.82 μV/deg/s with a nonlinearity of 9.5% full-scale output. This sensitivity is comparable with those of other PZT gyroscopes with single-axis control inputs.

Phenomenological model for coupled multi-axial piezoelectricity

Science.gov (United States)

Wei, Yuchen; Pellegrino, Sergio

2018-03-01

A quantitative calibration of an existing phenomenological model for polycrystalline ferroelectric ceramics is presented. The model relies on remnant strain and polarization as independent variables. Innovative experimental and numerical model identification procedures are developed for the characterization of the coupled electro-mechanical, multi-axial nonlinear constitutive law. Experiments were conducted on thin PZT-5A4E plates subjected to cross-thickness electric field. Unimorph structures with different thickness ratios between PZT-5A4E plate and substrate were tested, to subject the piezo plates to coupled electro-mechanical fields. Material state histories in electric field-strain-polarization space and stress-strain-polarization space were recorded. An optimization procedure is employed for the determination of the model parameters, and the calibrated constitutive law predicts both the uncoupled and coupled experimental observations accurately.

Energy Harvesting Characteristics from Water Flow by Piezoelectric Energy Harvester Device Using Cr/Nb Doped Pb(Zr,Ti)O3 Bimorph Cantilever

Science.gov (United States)

Kim, Kyoung-Bum; Kim, Chang Il; Jeong, Young Hun; Cho, Jeong-Ho; Paik, Jong-Hoo; Nahm, Sahn; Lim, Jong Bong; Seong, Tae-Hyeon

2013-10-01

A water flow energy harvester, which can convert water flow energy to electric energy, was fabricated for its application to rivers. This harvester can generate power from the bending and releasing motion of piezoelectric bimorph cantilevers. A Pb(Zr0.54Ti0.46)O3 + 0.2 wt % Cr2O3 + 1.0 wt % Nb2O5 (PZT-CN) thick film and a 250-µm-thick stainless steel were used as a bimorph cantilever. The electrical impedance matching was achieved across a resistive load of 1 kΩ. Four bimorph cantilevers can generate power from 5 to 105 rpm. The output powers were steadily increased by increasing the rpm. The maximum output power was 68 mW by 105 rpm. It was found that the water flow energy harvester can generate 58 mW by a flow velocity of (2 m/s) from the stream with the four bimorph cantilevers.

Piezoelectric Shunt Vibration Damping of F-15 Panel under High Acoustic Excitation

Science.gov (United States)

Wu, Shu-Yau; Turner, Travis L.; Rizzi, Stephen A.

2000-01-01

At last year's SPIE symposium, we reported results of an experiment on structural vibration damping of an F-15 underbelly panel using piezoelectric shunting with five bonded PZT transducers. The panel vibration was induced with an acoustic speaker at an overall sound pressure level (OASPL) of about 90 dB. Amplitude reductions of 13.45 and 10.72 dB were achieved for the first and second modes, respectively, using single- and multiple-mode shunting. It is the purpose of this investigation to extend the passive piezoelectric shunt-damping technique to control structural vibration induced at higher acoustic excitation levels, and to examine the controllability and survivability of the bonded PZT transducers at these high levels. The shunting experiment was performed with the Thermal Acoustic Fatigue Apparatus (TAFA) at the NASA Langley Research Center using the same F-15 underbelly panel. The TAFA is a progressive wave tube facility. The panel was mounted in one wall of the TAFA test section using a specially designed mounting fixture such that the panel was subjected to grazing-incidence acoustic excitation. Five PZT transducers were used with two shunt circuits designed to control the first and second modes of the structure between 200 and 400 Hz. We first determined the values of the shunt inductance and resistance at an OASPL of 130 dB. These values were maintained while we gradually increased the OASPL from 130 to 154 dB in 6-dB steps. During each increment, the frequency response function between accelerometers on the panel and the acoustic excitation measured by microphones, before and after shunting, were recorded. Good response reduction was observed up to the 148dB level. The experiment was stopped at 154 dB due to wire breakage from vibration at a transducer wire joint. The PZT transducers, however, were still bonded well on the panel and survived at this high dB level. We also observed shifting of the frequency peaks toward lower frequency when the OASPL

Feasibility of using PZT actuators to study the dynamic behavior of a rotating disk due to rotor-stator interaction.

Science.gov (United States)

Presas, Alexandre; Egusquiza, Eduard; Valero, Carme; Valentin, David; Seidel, Ulrich

2014-07-07

In this paper, PZT actuators are used to study the dynamic behavior of a rotating disk structure due to rotor-stator interaction excitation. The disk is studied with two different surrounding fluids-air and water. The study has been performed analytically and validated experimentally. For the theoretical analysis, the natural frequencies and the associated mode shapes of the rotating disk in air and water are obtained with the Kirchhoff-Love thin plate theory coupled with the interaction with the surrounding fluid. A model for the Rotor Stator Interaction that occurs in many rotating disk-like parts of turbomachinery such as compressors, hydraulic runners or alternators is presented. The dynamic behavior of the rotating disk due to this excitation is deduced. For the experimental analysis a test rig has been developed. It consists of a stainless steel disk (r = 198 mm and h = 8 mm) connected to a variable speed motor. Excitation and response are measured from the rotating system. For the rotating excitation four piezoelectric patches have been used. Calibrating the piezoelectric patches in amplitude and phase, different rotating excitation patterns are applied on the rotating disk in air and in water. Results show the feasibility of using PZT to control the response of the disk due to a rotor-stator interaction.

Feasibility of Using PZT Actuators to Study the Dynamic Behavior of a Rotating Disk due to Rotor-Stator Interaction

Directory of Open Access Journals (Sweden)

Alexandre Presas

2014-07-01

Full Text Available In this paper, PZT actuators are used to study the dynamic behavior of a rotating disk structure due to rotor-stator interaction excitation. The disk is studied with two different surrounding fluids—air and water. The study has been performed analytically and validated experimentally. For the theoretical analysis, the natural frequencies and the associated mode shapes of the rotating disk in air and water are obtained with the Kirchhoff-Love thin plate theory coupled with the interaction with the surrounding fluid. A model for the Rotor Stator Interaction that occurs in many rotating disk-like parts of turbomachinery such as compressors, hydraulic runners or alternators is presented. The dynamic behavior of the rotating disk due to this excitation is deduced. For the experimental analysis a test rig has been developed. It consists of a stainless steel disk (r = 198 mm and h = 8 mm connected to a variable speed motor. Excitation and response are measured from the rotating system. For the rotating excitation four piezoelectric patches have been used. Calibrating the piezoelectric patches in amplitude and phase, different rotating excitation patterns are applied on the rotating disk in air and in water. Results show the feasibility of using PZT to control the response of the disk due to a rotor-stator interaction.

Direct strain energy harvesting in automobile tires using piezoelectric PZT-polymer composites

NARCIS (Netherlands)

Ende, D.A. van den; Wiel, H.J. van de; Groen, W.A.; Zwaag, S. van der

2012-01-01

Direct piezoelectric strain energy harvesting can be used to power wireless autonomous sensors in environments where low frequency, high strains are present, such as in automobile tires during operation. However, these high strains place stringent demands on the materials with respect to mechanical

Thickness dependence of electrical properties in (0 0 1) oriented lead zirconate titanate films by laser ablation

International Nuclear Information System (INIS)

Zhu, T.J.; Lu, L.; Lai, M.O.; Soh, A.K.

2007-01-01

Highly (0 0 1)-oriented Pb(Zr 0.52 Ti 0.48 )O 3 (PZT) thin films with LaNiO 3 (LNO) bottom electrodes have been fabricated on amorphous TiN buffered Si substrates by pulsed laser deposition. The polarization-electric field (P-E) hysteresis of the deposited PZT films with different thickness ranging from 25 to 850 nm was measured. Results showed that the coercive field increases with the film thickness scaling down. No P-E loops could be obtained for the film of thickness of 25 nm. The deterioration of ferroelectric property in the thinnest film was attributed to extrinsic effect other than intrinsic size effect. Current-voltage (I-V) characteristics measurement showed the increase in leakage current of the PZT films with the decrease in the thickness of the films under the same bias voltage. At a high field regime, the leakage current of the PZT films of 25 nm thickness remained unchanged with increasing applied voltage. A totally depleted back-to-back Shottky barrier model was used to explain the effect of electrode interfaces on leakage current in the PZT films. It is believed that ferroelectric/electrode interfaces play an important role in the electrical properties of ferroelectric thin films with thickness at nanometer level

Experimental measurements and finite element models of High Displacement Piezoelectric Actuators.

Science.gov (United States)

Camargo, Gilberto; Ashford, Gevale; Naco, Eris; Usher, Tim

2004-03-01

Piezoelectric actuators have many applications including morphable wing technology and piezoelectric transformers. A Piezoelectric ceramic is a material that will move when a voltage is applied and conversely produces a charge when a pressure is applied. In our study, we examine THUNDER (Thin Layer Unimorph Ferroelectric Driver and Sensor) actuators (Thunder TM is a trademark of FACE International Corporation.) Thunder actuators are constructed by bonding thin PZT piezoelectric ceramics to metal sheets. We will present physical measurements of piezoelectric actuators, as well as measurements of the displacements due to applied voltages. In our studies we used a laser micrometer to measure the dimensional characteristics of four sizes of THUNDER actuators including TH-8R, TH-9R, TH-10R, and finally the TH-11R. We also developed computer models using a commercial fine element modeling package (FEM) known as ANSYS6.0®. This software enables us to construct our models controlling such attributes as exact dimensions of the three layers of the piezoelectric actuator, the material properties of each element, the type of load that is to be applied as well as the manner in which the layers are bonded together. The computer model compares favorably with the experimental results. Acknowledgements: NASA Grant No. 0051-0078 Department of Defense (DoD) Control No.ISP02-EUG15

Converse flexoelectric effect in comb electrode piezoelectric microbeam

Energy Technology Data Exchange (ETDEWEB)

Shen, Zhiyuan, E-mail: shenyuan675603@gmail.com [School of Mechanical and Aerospace Engineering, Nanyang Technological University, 50 Nanyang Avenue, 639798 Singapore (Singapore); Chen, Wei [Microelectronics Centre, School of Electrical and Electronic Engineering, Nanyang Technological University, 50 Nanyang Avenue, 639798 Singapore (Singapore)

2012-04-09

We demonstrate the converse flexoelectric effect in a lead zirconate titanate microbeam. The fringe electric field of a comb electrode induces converse flexoelectric responses in uniformly poled and depoled beams. The simulated electric field distribution shows that bending of the beam is induced by piezoelectric and μ{sub 11}, μ{sub 12} flexoelectric coefficients. Simulations indicate that piezoelectric displacement occurs in different directions in the two opposite poled samples while flexoelectric displacement remains the same. This finding is verified by the displacement measurement results. -- Highlights: ► We demonstrate the converse flexoelectric effect in a PZT microbeam. ► Beams with upward and downward poling states are fabricated by MEMS technique. ► Converse flexoelectric deformation is induced by the fringe field. ► Electric field distribution is calculated by finite element analysis. ► The simulation results are verified by impedance and displacement measurements.

Displacement and resonance behaviors of a piezoelectric diaphragm driven by a double-sided spiral electrode

KAUST Repository

Shen, Zhiyuan; Olfatnia, Mohammad; Miao, Jianmin; Wang, Zhihong

2012-01-01

This paper presents the design of a lead zirconate titanate (PZT) diaphragm actuated by double-sided patterned electrodes. Au/Cr electrodes were deposited on bulk PZT wafers by sputtering while patterned by a lift-off process. SU-8 thick film

Using Diffusion Bonding in Making Piezoelectric Actuators

Science.gov (United States)

Sager, Frank E.

2003-01-01

A technique for the fabrication of piezoelectric actuators that generate acceptably large forces and deflections at relatively low applied voltages involves the stacking and diffusion bonding of multiple thin piezoelectric layers coated with film electrodes. The present technique stands in contrast to an older technique in which the layers are bonded chemically, by use of urethane or epoxy agents. The older chemical-bonding technique entails several disadvantages, including the following: It is difficult to apply the bonding agents to the piezoelectric layers. It is difficult to position the layers accurately and without making mistakes. There is a problem of disposal of hazardous urethane and epoxy wastes. The urethane and epoxy agents are nonpiezoelectric materials. As such, they contribute to the thickness of a piezoelectric laminate without contributing to its performance; conversely, for a given total thickness, the performance of the laminate is below that of a unitary piezoelectric plate of the same thickness. The figure depicts some aspects of the fabrication of a laminated piezoelectric actuator by the present diffusion- bonding technique. First, stock sheets of the piezoelectric material are inspected and tested. Next, the hole pattern shown in the figure is punched into the sheets. Alternatively, if the piezoelectric material is not a polymer, then the holes are punched in thermoplastic films. Then both faces of each punched piezoelectric sheet or thermoplastic film are coated with a silver-ink electrode material by use of a silkscreen printer. The electrode and hole patterns are designed for minimal complexity and minimal waste of material. After a final electrical test, all the coated piezoelectric layers (or piezoelectric layers and coated thermoplastic films) are stacked in an alignment jig, which, in turn, is placed in a curved press for the diffusion-bonding process. In this process, the stack is pressed and heated at a specified curing temperature

Vibrations of thin piezoelectric shallow shells: Two-dimensional ...

Indian Academy of Sciences (India)

R. Narasimhan (Krishtel eMaging) 1461 1996 Oct 15 13:05:22

In this paper we consider the eigenvalue problem for piezoelectric shallow shells and we show that, as the thickness of the shell goes to zero, the eigensolutions of the three-dimensional piezoelectric shells converge to the eigensolutions of a two- dimensional eigenvalue problem. Keywords. Vibrations; piezoelectricity ...

Electronically droplet energy harvesting using piezoelectric cantilevers

KAUST Repository

Al Ahmad, Mahmoud Al; Jabbour, Ghassan E.

2012-01-01

A report is presented on free falling droplet energy harvesting using piezoelectric cantilevers. The harvester incorporates a multimorph clamped-free cantilever which is composed of five layers of lead zirconate titanate piezoelectric thick films

Nonlinear ultrasonic fatigue crack detection using a single piezoelectric transducer

Science.gov (United States)

An, Yun-Kyu; Lee, Dong Jun

2016-04-01

This paper proposes a new nonlinear ultrasonic technique for fatigue crack detection using a single piezoelectric transducer (PZT). The proposed technique identifies a fatigue crack using linear (α) and nonlinear (β) parameters obtained from only a single PZT mounted on a target structure. Based on the different physical characteristics of α and β, a fatigue crack-induced feature is able to be effectively isolated from the inherent nonlinearity of a target structure and data acquisition system. The proposed technique requires much simpler test setup and less processing costs than the existing nonlinear ultrasonic techniques, but fast and powerful. To validate the proposed technique, a real fatigue crack is created in an aluminum plate, and then false positive and negative tests are carried out under varying temperature conditions. The experimental results reveal that the fatigue crack is successfully detected, and no positive false alarm is indicated.

Piezoelectric-nanowire-enabled power source for driving wireless microelectronics.

Science.gov (United States)

Xu, Sheng; Hansen, Benjamin J; Wang, Zhong Lin

2010-10-19

Harvesting energy from irregular/random mechanical actions in variable and uncontrollable environments is an effective approach for powering wireless mobile electronics to meet a wide range of applications in our daily life. Piezoelectric nanowires are robust and can be stimulated by tiny physical motions/disturbances over a range of frequencies. Here, we demonstrate the first chemical epitaxial growth of PbZr(x)Ti(1-x)O(3) (PZT) nanowire arrays at 230 °C and their application as high-output energy converters. The nanogenerators fabricated using a single array of PZT nanowires produce a peak output voltage of ~0.7 V, current density of 4 μA cm(-2) and an average power density of 2.8 mW cm(-3). The alternating current output of the nanogenerator is rectified, and the harvested energy is stored and later used to light up a commercial laser diode. This work demonstrates the feasibility of using nanogenerators for powering mobile and even personal microelectronics.

Multifield analysis of a piezoelectric valveless micropump: effects of actuation frequency and electric potential

International Nuclear Information System (INIS)

Sayar, Ersin; Farouk, Bakhtier

2012-01-01

Coupled multifield analysis of a piezoelectrically actuated valveless micropump device is carried out for liquid (water) transport applications. The valveless micropump consists of two diffuser/nozzle elements; the pump chamber, a thin structural layer (silicon), and a piezoelectric layer, PZT-5A as the actuator. We consider two-way coupling of forces between solid and liquid domains in the systems where actuator deflection causes fluid flow and vice versa. Flow contraction and expansion (through the nozzle and the diffuser respectively) generate net fluid flow. Both structural and flow field analysis of the microfluidic device are considered. The effect of the driving power (voltage) and actuation frequency on silicon-PZT-5A bi-layer membrane deflection and flow rate is investigated. For the compressible flow formulation, an isothermal equation of state for the working fluid is employed. The governing equations for the flow fields and the silicon-PZT-5A bi-layer membrane motions are solved numerically. At frequencies below 5000 Hz, the predicted flow rate increases with actuation frequency. The fluid–solid system shows a resonance at 5000 Hz due to the combined effect of mechanical and fluidic capacitances, inductances, and damping. Time-averaged flow rate starts to drop with increase of actuation frequency above (5000 Hz). The velocity profile in the pump chamber becomes relatively flat or plug-like, if the frequency of pulsations is sufficiently large (high Womersley number). The pressure, velocity, and flow rate prediction models developed in the present study can be utilized to optimize the design of MEMS based micropumps. (paper)

Multifield analysis of a piezoelectric valveless micropump: effects of actuation frequency and electric potential

Science.gov (United States)

Sayar, Ersin; Farouk, Bakhtier

2012-07-01

Coupled multifield analysis of a piezoelectrically actuated valveless micropump device is carried out for liquid (water) transport applications. The valveless micropump consists of two diffuser/nozzle elements; the pump chamber, a thin structural layer (silicon), and a piezoelectric layer, PZT-5A as the actuator. We consider two-way coupling of forces between solid and liquid domains in the systems where actuator deflection causes fluid flow and vice versa. Flow contraction and expansion (through the nozzle and the diffuser respectively) generate net fluid flow. Both structural and flow field analysis of the microfluidic device are considered. The effect of the driving power (voltage) and actuation frequency on silicon-PZT-5A bi-layer membrane deflection and flow rate is investigated. For the compressible flow formulation, an isothermal equation of state for the working fluid is employed. The governing equations for the flow fields and the silicon-PZT-5A bi-layer membrane motions are solved numerically. At frequencies below 5000 Hz, the predicted flow rate increases with actuation frequency. The fluid-solid system shows a resonance at 5000 Hz due to the combined effect of mechanical and fluidic capacitances, inductances, and damping. Time-averaged flow rate starts to drop with increase of actuation frequency above (5000 Hz). The velocity profile in the pump chamber becomes relatively flat or plug-like, if the frequency of pulsations is sufficiently large (high Womersley number). The pressure, velocity, and flow rate prediction models developed in the present study can be utilized to optimize the design of MEMS based micropumps.

Modelling, fabrication, and characterization for improved piezoelectric energy harvesters

Science.gov (United States)

Alomari, Almuatasim Ali

The ambitious goal of this dissertation is to contribute its share to the scientific researchers and academic community by demonstrate a versatile study on energy harvesting via smart materials. Smart materials are amongst the current production modes which generate clean and green energy. The advantages of smart materials include ferroelectric, piezoelectric, and pyroelectric ceramics and composites in materials science and technology of the 21 st century are inconceivable. Their most current applications include conventional sensors, actuators, batteries replacement, and switch. Further, Piezoelectricity is the accumulation of electrical charges as a result of applying mechanical stress on certain type of materials such as crystals, DNA, and protein, where pyro-electricity is the accumulation of electrical charges from ambient environment from temperature gauges or fluctuations. In an incessant effort to increase the performance of smart materials devices researchers in both academic and industrial communities in field of green energy have suggested many techniques and procedures to increase the power generation capability and enhance the bandwidth of thermal and vibration energy harvesters. In this study, the EulerBernoulli beam Theory, lumped parameter model (LPM), and chain matrix method were applied on various design and structure shape of smart materials to find the output electrical parameters. The modeling and simulation investigations are accomplished using MATLAB program and COMSOL Multiphysics software. A low-cost fabrication technique, of polyvinyl-dine difluoride (PVDF) with different amount of Lead Zirconate Titanate (PZT), Lead Magnesium Niobate-Lead Titanate (PMN-PT), and Multi-walled Carbon Nanotubes (MWCNT) are introduced in this study as well. Later, the (Paint/ PZT) fabricated nanocomposites was tested for dielectric constants over a wide frequency range at different temperatures. It was observed that the composites with higher concentrations

Three-degree-of-freedom ultrasonic motor using a 5-mm-diameter piezoelectric ceramic tube.

Science.gov (United States)

Mingsen Guo; Junhui Hu; Hua Zhu; Chunsheng Zhao; Shuxiang Dong

2013-07-01

A small three-degree-of-freedom ultrasonic motor has been developed using a simple piezoelectric lead zirconate titanate (PZT)-tube stator (OD 5 mm, ID 3 mm, length 15 mm). The stator drives a ball-rotor into rotational motion around one of three orthogonal (x-, y-, and z-) axes by combing the first longitudinal and second bending vibration modes. A motor prototype was fabricated and characterized; its performance was superior to those of previous motors made with a PZT ceramic/metal composite stator of comparable size. The method for further improving the performance was discussed. The motor can be further miniaturized and it has potential to be applied to medical microrobots, endoscopes or micro laparoscopic devices, and cell manipulation devices.

Vibrations of Thin Piezoelectric Shallow Shells

Indian Academy of Sciences (India)

Abstract. In this paper we consider the eigenvalue problem for piezoelectric shallow shells and we show that, as the thickness of the shell goes to zero, the eigensolutions of the three-dimensional piezoelectric shells converge to the eigensolutions of a two-dimensional eigenvalue problem.

Recent developments in piezoelectric ceramic materials and deterioration of their properties

International Nuclear Information System (INIS)

Pasha, R.A.; Khan, M.Z.

2006-01-01

There has been growing interest in recent years in piezoelectric ceramic materials because of their excellent dielectric, sensing, actuating and efficient process control applications. Lead Zirconate Titanate (PZT), Barium Titanate (BaTi O/sub 3/) and Lead Metaniobate (PbNb/sub 2/ O/sub 6/) and PVDF Polymers and generally favored as smart sensing materials. These materials are being used in critical engineering systems and smart structure. Fatigue failure due to electrical and thermal shocking is a major issue in degradation of these materials. Lot of work has been done in this area but still various issues need to investigate. Recent developments and current issues in piezoelectric materials and deterioration of their properties in different working conditions are discussed. The development of Finite Element codes incorporating smart material element has provided an opportunity to solve some practical problems. The new piezoelectric finite element capability available in some commercial package like ANSYS makes it convenient to perform static dynamic and thermal analysis for the fully coupled piezoelectric and structural response. Researchers have a great scope to uncover the various properties of these smart materials in different environmental conditions. In present work an overall review of the title is presented. (author)

Polarization characterization of PZT disks and of embedded PZT plates by thermal wave methods

International Nuclear Information System (INIS)

Eydam, Agnes; Suchaneck, Gunnar; Gerlach, Gerald; Esslinger, Sophia; Schönecker, Andreas; Neumeister, Peter

2014-01-01

In this work, the thermal wave method was applied to characterize PZT disks and embedded PZT plates with regard to the polarization magnitude and spatial homogeneity. The samples were exposed to periodic heating by means of a laser beam and the pyroelectric response was determined. Thermal relaxation times (single time constants or distributions of time constants) describe the heat losses of the PZT samples to the environment. The resulting pyroelectric current spectrum was fitted to the superposition of thermal relaxation processes. The pyroelectric coefficient gives insight in the polarization distribution. For PZT disks, the polarization distribution in the surface region showed a characteristic decrease towards the electrodes

Determination of the reduced matrix of the piezoelectric, dielectric, and elastic material constants for a piezoelectric material with C∞ symmetry.

Science.gov (United States)

Sherrit, Stewart; Masys, Tony J; Wiederick, Harvey D; Mukherjee, Binu K

2011-09-01

We present a procedure for determining the reduced piezoelectric, dielectric, and elastic coefficients for a C(∞) material, including losses, from a single disk sample. Measurements have been made on a Navy III lead zirconate titanate (PZT) ceramic sample and the reduced matrix of coefficients for this material is presented. In addition, we present the transform equations, in reduced matrix form, to other consistent material constant sets. We discuss the propagation of errors in going from one material data set to another and look at the limitations inherent in direct calculations of other useful coefficients from the data.

Conservation of the piezoelectric response of PVDF films under irradiation

Science.gov (United States)

Melilli, G.; Lairez, D.; Gorse, D.; Garcia-Caurel, E.; Peinado, A.; Cavani, O.; Boizot, B.; Clochard, M.-C.

2018-01-01

As opposed to piezo-ceramics (i.e PZT), flexibility and robustness characterize piezoelectric polymers. The main advantage of a piezoelectric polymer, such as Poly (vinylidene fluoride) (PVDF), is an electric power generation under large reversible elastic deformation. Starting from polarized PVDF, we have shown that, despite the fact that irradiation is known to structurally modify the PVDF by introducing defects (radicals, chain scission and crosslinks), the electro-active properties were not affected. At doses lower than 100 kGy, a comparison between swift heavy-ion (SHI) and e-beam irradiations is presented. A homemade device was realized to measure the output voltage as a function of the bending deformation for irradiated and non-irradiated PVDF film. DSC and FT-IR techniques give new insights on which crystalline part or structural change contributes to the conservation of the output voltage. Results suggest that despite the material after irradiation is composed of smaller crystallites, the β-phase content remains stable around 36%, which explains the remarkable preservation of the piezoelectric response in irradiated polarized PVDF films.

Epitaxial Pb(Zr,Ti)O3 thin films for a MEMS application

International Nuclear Information System (INIS)

Nguyen, Minh D; Vu, Hung N; Blank, Dave H A; Rijnders, Guus

2011-01-01

This research presents the deposition and device fabrication of epitaxial Pb(Zr,Ti)O 3 (PZT) thin films for applications in microelectromechanical systems (MEMS). A piezoelectric micro-membrane is described as an example. Using the pulsed laser deposition (PLD) technique and the MEMS microfabrication process, the piezo-membranes with diameters ranging from 200 to 500 μm were obtained. The displacement of piezo-membranes increased from 5.1 to 17.5 nm V −1 with a piezoelectric-membrane diameter in the range of 200–500 μm. Furthermore, the effect of PZT film-thickness on the mechanical properties has been investigated. By using the conductive-oxide SrRuO 3 (SRO) layers as the electrodes, the degradation of both ferroelectric and piezoelectric properties is prevented up to 10 10 switching cycles

Equivalent Circuit Model of Low-Frequency Magnetoelectric Effect in Disk-Type Terfenol-D/PZT Laminate Composites Considering a New Interface Coupling Factor.

Science.gov (United States)

Lou, Guofeng; Yu, Xinjie; Lu, Shihua

2017-06-15

This paper describes the modeling of magnetoelectric (ME) effects for disk-type Terfenol-D (Tb 0.3 Dy 0.7 Fe 1.92 )/PZT (Pb(Zr,Ti)O₃) laminate composite at low frequency by combining the advantages of the static elastic model and the equivalent circuit model, aiming at providing a guidance for the design and fabrication of the sensors based on magnetoelectric laminate composite. Considering that the strains of the magnetostrictive and piezoelectric layers are not equal in actual operating due to the epoxy resin adhesive bonding condition, the magnetostrictive and piezoelectric layers were first modeled through the equation of motion separately, and then coupled together with a new interface coupling factor k c , which physically reflects the strain transfer between the phases. Furthermore, a theoretical expression containing k c for the transverse ME voltage coefficient α v and the optimum thickness ratio n optim to which the maximum ME voltage coefficient corresponds were derived from the modified equivalent circuit of ME laminate, where the interface coupling factor acted as an ideal transformer. To explore the influence of mechanical load on the interface coupling factor k c , two sets of weights, i.e., 100 g and 500 g, were placed on the top of the ME laminates with the same thickness ratio n in the sample fabrication. A total of 22 T-T mode disk-type ME laminate samples with different configurations were fabricated. The interface coupling factors determined from the measured α v and the DC bias magnetic field H bias were 0.11 for 500 g pre-mechanical load and 0.08 for 100 g pre-mechanical load. Furthermore, the measured optimum thickness ratios were 0.61 for k c = 0.11 and 0.56 for k c = 0.08. Both the theoretical ME voltage coefficient α v and optimum thickness ratio n optim containing k c agreed well with the measured data, verifying the reasonability and correctness for the introduction of k c in the modified equivalent circuit model.

Equivalent Circuit Model of Low-Frequency Magnetoelectric Effect in Disk-Type Terfenol-D/PZT Laminate Composites Considering a New Interface Coupling Factor

Directory of Open Access Journals (Sweden)

Guofeng Lou

2017-06-01

Full Text Available This paper describes the modeling of magnetoelectric (ME effects for disk-type Terfenol-D (Tb0.3Dy0.7Fe1.92/PZT (Pb(Zr,TiO3 laminate composite at low frequency by combining the advantages of the static elastic model and the equivalent circuit model, aiming at providing a guidance for the design and fabrication of the sensors based on magnetoelectric laminate composite. Considering that the strains of the magnetostrictive and piezoelectric layers are not equal in actual operating due to the epoxy resin adhesive bonding condition, the magnetostrictive and piezoelectric layers were first modeled through the equation of motion separately, and then coupled together with a new interface coupling factor kc, which physically reflects the strain transfer between the phases. Furthermore, a theoretical expression containing kc for the transverse ME voltage coefficient αv and the optimum thickness ratio noptim to which the maximum ME voltage coefficient corresponds were derived from the modified equivalent circuit of ME laminate, where the interface coupling factor acted as an ideal transformer. To explore the influence of mechanical load on the interface coupling factor kc, two sets of weights, i.e., 100 g and 500 g, were placed on the top of the ME laminates with the same thickness ratio n in the sample fabrication. A total of 22 T-T mode disk-type ME laminate samples with different configurations were fabricated. The interface coupling factors determined from the measured αv and the DC bias magnetic field Hbias were 0.11 for 500 g pre-mechanical load and 0.08 for 100 g pre-mechanical load. Furthermore, the measured optimum thickness ratios were 0.61 for kc = 0.11 and 0.56 for kc = 0.08. Both the theoretical ME voltage coefficient αv and optimum thickness ratio noptim containing kc agreed well with the measured data, verifying the reasonability and correctness for the introduction of kc in the modified equivalent circuit model.

Tubular fluoropolymer arrays with high piezoelectric response

Science.gov (United States)

Zhukov, Sergey; Eder-Goy, Dagmar; Biethan, Corinna; Fedosov, Sergey; Xu, Bai-Xiang; von Seggern, Heinz

2018-01-01

Polymers with electrically charged internal air cavities called ferroelectrets exhibit a pronounced piezoelectric effect and are regarded as soft functional materials suitable for sensor and actuator applications. In this work, a simple method for fabricating piezoelectret arrays with open-tubular channels is introduced. A set of individual fluoroethylenepropylene (FEP) tubes is compressed between two heated metal plates. The squeezed FEP tubes are melted together at +270 °C. The resulting structure is a uniform, multi-tubular, flat array that reveals a strong piezoelectric response after a poling step. The fabricated arrays have a high ratio between piezoelectrically active and non-active areas. The optimal charging voltage and stability of the piezoelectric coefficients with pressures and frequency were experimentally investigated for two specific array structures with wall thickness of 50 and 120 μm. The array fabricated from 50 μm thick FEP tubes reveals a stable and high piezoelectric coefficient of {d}33 = 120-160 pC N-1 with a flat frequency response between 0.1 Hz and 10 kHz for pressures between 1 and 100 kPa. An increase of wall thickness to 120 μm is accompanied by a more than twofold decrease in the piezoelectric coefficient as a result of a simultaneously higher effective array stiffness and lower remanent polarization. The obtained experimental results can be used to optimize the array design with regard to the electromechanical performance.

Biotemplated Synthesis of PZT Nanowires

Science.gov (United States)

2013-11-25

electromechanical coupling coefficient , Y is the Young’s modulus, and Ri is intrinsic resistance. The PZT nanowire- based film is taken to have negligible...robotic actuation, and bioMEMS. Lead zirconate titanate ( PZT ), in particular, has attracted significant attention, owing to its superior...electromechanical conversion performance. Yet, the ability to synthesize crystalline PZT nanowires with reproducible and well-controlled properties remains a

Texturation of lead-free BaTiO3-based piezoelectric ceramics

OpenAIRE

Ngueteu-Kamlo , A; Levassort , F; Pham Thi , M; Marchet , Pascal

2014-01-01

International audience; Nowadays, piezoelectric ceramics are integrated in a wide range of devices, in particular in ultrasonic applications (underwater sonar systems, medical imaging, non-destructive testing…). Most of them use Pb(Zr,Ti)O3 (PZT). However, due to health care and environmental problems, lead content must be reduced in such applications [1]. Recent reviews demonstrated that few lead-free materials families can be considered: the alkaline-niobates (K0.5Na0.5NbO3), the alkaline-b...

Laminated piezoelectric transformer

Science.gov (United States)

Vazquez Carazo, Alfredo (Inventor)

2006-01-01

A laminated piezoelectric transformer is provided using the longitudinal vibration modes for step-up voltage conversion applications. The input portions are polarized to deform in a longitudinal plane and are bonded to an output portion. The deformation of the input portions is mechanically coupled to the output portion, which deforms in the same longitudinal direction relative to the input portion. The output portion is polarized in the thickness direction relative its electrodes, and piezoelectrically generates a stepped-up output voltage.

Distributed parameter modeling to prevent charge cancellation for discrete thickness piezoelectric energy harvester

Science.gov (United States)

Krishnasamy, M.; Qian, Feng; Zuo, Lei; Lenka, T. R.

2018-03-01

The charge cancellation due to the change of strain along single continuous piezoelectric layer can remarkably affect the performance of a cantilever based harvester. In this paper, analytical models using distributed parameters are developed with some extent of averting the charge cancellation in cantilever piezoelectric transducer where the piezoelectric layers are segmented at strain nodes of concerned vibration mode. The electrode of piezoelectric segments are parallelly connected with a single external resistive load in the 1st model (Model 1). While each bimorph piezoelectric layers are connected in parallel to a resistor to form an independent circuit in the 2nd model (Model 2). The analytical expressions of the closed-form electromechanical coupling responses in frequency domain under harmonic base excitation are derived based on the Euler-Bernoulli beam assumption for both models. The developed analytical models are validated by COMSOL and experimental results. The results demonstrate that the energy harvesting performance of the developed segmented piezoelectric layer models is better than the traditional model of continuous piezoelectric layer.

Temperature coefficient of piezoelectric constants in Pb(Mg1/3 Nb2/3O3 - PbTiO3 ceramics

Directory of Open Access Journals (Sweden)

Manuel Henrique Lente

2004-06-01

Full Text Available In this work, the thermal stability of piezoelectric constants of PMN-PT ceramics in the tetragonal and rhombohedral phases were investigated in a wide range of temperatures. The results showed that the tetragonal PMN-PT presented higher thermal stability and, consequently, the temperature coefficients for the piezoelectric constants were approximately zero. This result revealed to be much better than that commonly found for PZT ceramics. Although the rhombohedral PMN-PT presented a slight lower thermal stability, the values found for the coupling factor were significantly higher than the tetragonal composition.

Piezoelectric MEMS resonators

CERN Document Server

Piazza, Gianluca

2017-01-01

This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associate...

Modeling the power output of piezoelectric energy harvesters

KAUST Repository

Al Ahmad, Mahmoud

2011-04-30

Design of experiments and multiphysics analyses were used to develop a parametric model for a d 33-based cantilever. The analysis revealed that the most significant parameters influencing the resonant frequency are the supporting layer thickness, piezoelectric layer thickness, and cantilever length. On the other hand, the most important factors affecting the charge output arethe piezoelectric thickness and the interdigitated electrode dimensions. The accuracy of the developed model was confirmed and showed less than 1% estimation error compared with a commercial simulation package. To estimate the power delivered to a load, the electric current output from the piezoelectric generator was calculated. A circuit model was built and used to estimate the power delivered to a load, which compared favorably to experimentally published power data on actual cantilevers of similar dimensions. © 2011 TMS.

Modeling the power output of piezoelectric energy harvesters

KAUST Repository

Al Ahmad, Mahmoud; Alshareef, Husam N.

2011-01-01

Design of experiments and multiphysics analyses were used to develop a parametric model for a d 33-based cantilever. The analysis revealed that the most significant parameters influencing the resonant frequency are the supporting layer thickness, piezoelectric layer thickness, and cantilever length. On the other hand, the most important factors affecting the charge output arethe piezoelectric thickness and the interdigitated electrode dimensions. The accuracy of the developed model was confirmed and showed less than 1% estimation error compared with a commercial simulation package. To estimate the power delivered to a load, the electric current output from the piezoelectric generator was calculated. A circuit model was built and used to estimate the power delivered to a load, which compared favorably to experimentally published power data on actual cantilevers of similar dimensions. © 2011 TMS.

Analysis of vibration waveforms of electromechanical response to determine piezoelectric and electrostrictive coefficients.

Science.gov (United States)

Izumi, Tatsuya; Hagiwara, Manabu; Hoshina, Takuya; Takeda, Hiroaki; Tsurumi, Takaaki

2012-08-01

We developed a possible method to determine both coefficients of piezoelectricity (d) and electrostriction (M) at the same time by a waveform analysis of current and vibration velocity in the resonance state. The waveforms of the current and vibration velocity were theoretically described using the equations of motion and piezoelectric constitutive equations, considering the dissipation effect. The dissipation factor of the d coefficient and M coefficient is dielectric loss tangent tan δ. The waveforms measured in all of the ceramics, such as Pb(Zr,Ti)O(3) (PZT), Pb(Mg,Nb)O(3) (PMN), and 0.8Pb(Mg(1/3)Nb2/3)O(3)-0.2PbTiO(3) (PMN-PT), were well fitted with the calculated waveform. This fitting produced both the d and M coefficients, which agreed with those determined via the conventional methods. Moreover, the respective contributions of both piezoelectricity and electrostriction to the d value determined in the resonance-antiresonance method were clarified.

Contactless ultrasonic energy transfer for wireless systems: acoustic-piezoelectric structure interaction modeling and performance enhancement

International Nuclear Information System (INIS)

Shahab, S; Erturk, A

2014-01-01

There are several applications of wireless electronic components with little or no ambient energy available to harvest, yet wireless battery charging for such systems is still of great interest. Example applications range from biomedical implants to sensors located in hazardous environments. Energy transfer based on the propagation of acoustic waves at ultrasonic frequencies is a recently explored alternative that offers increased transmitter-receiver distance, reduced loss and the elimination of electromagnetic fields. As this research area receives growing attention, there is an increased need for fully coupled model development to quantify the energy transfer characteristics, with a focus on the transmitter, receiver, medium, geometric and material parameters. We present multiphysics modeling and case studies of the contactless ultrasonic energy transfer for wireless electronic components submerged in fluid. The source is a pulsating sphere, and the receiver is a piezoelectric bar operating in the 33-mode of piezoelectricity with a fundamental resonance frequency above the audible frequency range. The goal is to quantify the electrical power delivered to the load (connected to the receiver) in terms of the source strength. Both the analytical and finite element models have been developed for the resulting acoustic-piezoelectric structure interaction problem. Resistive and resistive–inductive electrical loading cases are presented, and optimality conditions are discussed. Broadband power transfer is achieved by optimal resistive-reactive load tuning for performance enhancement and frequency-wise robustness. Significant enhancement of the power output is reported due to the use of a hard piezoelectric receiver (PZT-8) instead of a soft counterpart (PZT-5H) as a result of reduced material damping. The analytical multiphysics modeling approach given in this work can be used to predict and optimize the coupled system dynamics with very good accuracy and

Development of dual PZT transducers for reference-free crack detection in thin plate structures.

Science.gov (United States)

Sohn, Hoon; Kim, Seuno Bum

2010-01-01

A new Lamb-wave-based nondestructive testing (NDT) technique, which does not rely on previously stored baseline data, is developed for crack monitoring in plate structures. Commonly, the presence of damage is identified by comparing "current data" measured from a potentially damaged stage of a structure with "baseline data" previously obtained at the intact condition of the structure. In practice, structural defects typically take place long after collection of the baseline data, and the baseline data can be also affected by external loading, temperature variations, and changing boundary conditions. To eliminate the dependence on the baseline data comparison, the authors previously developed a reference-free NDT technique using 2 pairs of collocated lead zirconate titanate (PZT) transducers placed on both sides of a plate. This reference-free technique is further advanced in the present study by the necessity of attaching transducers only on a single surface of a structure for certain applications such as aircraft. To achieve this goal, a new design of PZT transducers called dual PZT transducers is proposed. Crack formation creates Lamb wave mode conversion due to a sudden thickness change of the structure. This crack appearance is instantly detected from the measured Lamb wave signals using the dual PZT transducers. This study also suggests a reference-free statistical approach that enables damage classification using only the currently measured data set. Numerical simulations and experiments were conducted using an aluminum plate with uniform thickness and fundamental Lamb waves modes to demonstrate the applicability of the proposed technique to reference-free crack detection.

Y{sub 3}Fe{sub 5}O{sub 12}/Na,Bi,Sr-doped PZT particulate magnetoelectric composites

Energy Technology Data Exchange (ETDEWEB)

Lisnevskaya, I.V., E-mail: liv@sfedu.ru; Bobrova, I.A.; Lupeiko, T.G.; Agamirzoeva, M.R.; Myagkaya, K.V.

2016-05-01

Magnetoelectric (ME) composites of Na, Bi, Sr substituted lead zirconate titanate (PZT) and yttrium iron garnet having representative formula (100−x) wt% Na,Bi,Sr-doped PZT (PZTNB-1)+x wt% Y{sub 3}Fe{sub 5}O{sub 12} (YIG) with x=10–90 were manufactured using powdered components obtained through sol–gel processes. It is shown that the decrease in sintering temperature provided by the use of finely dispersed PZTNB-1 and YIG powders allows to significantly reduce content of fluorite-like foreign phase based on zirconium oxide, which forms due to the interfacial interaction during heat treatment and becomes stabilized by yttrium oxide. Connectivity has considerable effect on the value of ME coefficient of composite ceramics. With the same x value, ΔE/ΔH characteristic decreases when changing from 0–3-type structured composites (PZT grains embedded in ferrite matrix) to 3-3-(interpenetrating network of two phases) and especially 3-0-type samples (YIG grains embedded in PZT matrix); in the last case this can be attributed to the substrate clamping effect when ferrite grains are clamped with piezoelectric matrix. ΔE/ΔH value of 0–3 composites with x=40–60 wt% was found to be ∼1.6 mV/(cm Oe). - Highlights: • Y{sub 3}Fe{sub 5}O{sub 12}/Na,Bi,Sr-doped PZT particulate magnetoelectric composites were prepared. • The decrease in sintering temperature reduces the content of foreign phase of ZrO{sub 2}. • Connectivity pattern is important factor for magnetoelectric response. • The value of ME coefficient reaches ~1,6 mV/(cm Oe) in 0–3 composites.

Note: a high-sensitivity current sensor based on piezoelectric ceramic Pb(Zr,Ti)O3 and ferromagnetic materials.

Science.gov (United States)

He, Wei; Li, Ping; Wen, Yumei; Zhang, Jitao; Yang, Aichao; Lu, Caijiang

2014-02-01

An electric current sensor using piezoelectric ceramic Pb(Zr,Ti)O3 (PZT) sandwiched between two high permeability cuboids and two NdFeB magnets is presented. The magnetic field originating from an electric wire is augmented by the high permeability cuboids. The PZT plate experiences an enhanced magnetic force and generates voltage output. When placed with a distance of d = 5.0 mm from the wire, the sensor shows a flat sensitivity of ∼5.7 mV/A in the frequency range of 30 Hz-80 Hz and an average sensitivity of 5.6 mV/A with highly linear behavior in the current range of 1 A-10 A at 50 Hz.

Piezoelectric Structures and Low Power Generation Devices

Directory of Open Access Journals (Sweden)

Irinela CHILIBON

2016-10-01

Full Text Available A short overview of different piezoelectric structures and devices for generating renewable electricity under mechanical actions is presented. A vibrating piezoelectric device differs from a typical electrical power source in that it has capacitive rather than inductive source impedance, and may be driven by mechanical vibrations of varying amplitude. Several techniques have been developed to extract energy from the environment. Generally, “vibration energy” could be converted into electrical energy by three techniques: electrostatic charge, magnetic fields and piezoelectric. Mechanical resonance frequency of piezoelectric bimorph transducers depends on geometric size (length, width, and thickness of each layer, and the piezoelectric coefficients of the piezoelectric material. Manufacturing processes and intended applications of several energy harvesting devices are presented.

Large displacement vertical translational actuator based on piezoelectric thin films.

Science.gov (United States)

Qiu, Zhen; Pulskamp, Jeffrey S; Lin, Xianke; Rhee, Choong-Ho; Wang, Thomas; Polcawich, Ronald G; Oldham, Kenn

2010-07-01

A novel vertical translational microactuator based on thin-film piezoelectric actuation is presented, using a set of four compound bend-up/bend-down unimorphs to produce translational motion of a moving platform or stage. The actuation material is a chemical-solution deposited lead-zirconate-titanate (PZT) thin film. Prototype designs have shown as much as 120 μ m of static displacement, with 80-90 μ m displacements being typical, using four 920 μ m long by 70 μ m legs. Analytical models are presented that accurately describe nonlinear behavior in both static and dynamic operation of prototype stages when the dependence of piezoelectric coefficients on voltage is known. Resonance of the system is observed at a frequency of 200 Hz. The large displacement and high bandwidth of the actuators at low-voltage and low-power levels should make them useful to a variety of optical applications, including endoscopic microscopy.

Assessment of a new piezoelectric transducer sensor for noninvasive cardiorespiratory monitoring of newborn infants in the NICU.

Science.gov (United States)

Sato, Shinichi; Ishida-Nakajima, Wako; Ishida, Akira; Kawamura, Masanari; Miura, Shinobu; Ono, Kyoichi; Inagaki, Nobuya; Takada, Goro; Takahashi, Tsutomu

2010-01-01

Electrocardiogram (ECG) and impedance pneumography (IPG), the most widely used techniques for cardiorespiratory monitoring in the neonatal intensive care unit (NICU), have the disadvantage of causing skin damage when used for very premature newborn infants. To prevent skin damage, we designed a new piezoelectric transducer (PZT) sensor. To assess the potential of the PZT sensor for cardiorespiratory monitoring in the NICU. The PZT sensor was placed under a folded towel under a neonate to detect an acoustic cardiorespiratory signal, from which heart rate (HR) and breathing rate (BR) were calculated, together with simultaneous ECG/IPG recording for 1-9 days for long and brief (1-min) assessment. The brief assessment showed average correlation coefficients of 0.92 +/- 0.12 and 0.95 +/- 0.02 between instantaneous HRs/BRs detected by the PZT sensor and ECG/IPG in 27 and 11 neonates examined. During the long assessment, the HR detection rate by the PZT sensor was approximately 10% lower than that by ECG (82.6 +/- 12.9 vs. 91.8 +/- 4.1%; p = 0.001, n = 27), although comparable (90.3 +/- 4.1 vs. 92.5 +/- 3.4%, p = 0.081) in approximately 70% (18/27) of neonates examined; BR detection rate was comparable between the PZT sensor and IPG during relatively stable signal conditions (95.9 +/- 4.0 vs. 95.3 +/- 3.5%; p = 0.38, n = 11). The PZT sensor caused neither skin damage nor body movement increase in all neonates examined. The PZT sensor is noninvasive and does not cause skin irritation, and we believe it does provide a reliable, accurate cardiorespiratory monitoring tool for use in the NICU, although the issue of mechanical-ventilation noise remains to be solved. Copyright 2010 S. Karger AG, Basel.

Nanoscale characterization and local piezoelectric properties of lead-free KNN-LT-LS thin films

Energy Technology Data Exchange (ETDEWEB)

Abazari, M; Safari, A [Glenn Howatt Electroceramics Laboratories, Department of Materials Science and Engineering, Rutgers-The state University of New Jersey, Piscataway, NJ 08854 (United States); Choi, T; Cheong, S-W [Rutgers Center for Emergent Materials, Department of Physics and Astronomy, Rutgers-The state University of New Jersey, Piscataway, NJ 08854 (United States)

2010-01-20

We report the observation of domain structure and piezoelectric properties of pure and Mn-doped (K{sub 0.44},Na{sub 0.52},Li{sub 0.04})(Nb{sub 0.84},Ta{sub 0.1},Sb{sub 0.06})O{sub 3} (KNN-LT-LS) thin films on SrTiO{sub 3} substrates. It is revealed that, using piezoresponse force microscopy, ferroelectric domain structure in such 500 nm thin films comprised of primarily 180{sup 0} domains. This was in accordance with the tetragonal structure of the films, confirmed by relative permittivity measurements and x-ray diffraction patterns. Effective piezoelectric coefficient (d{sub 33}) of the films were calculated using piezoelectric displacement curves and shown to be {approx}53 pm V{sup -1} for pure KNN-LT-LS thin films. This value is among the highest values reported for an epitaxial lead-free thin film and shows a great potential for KNN-LT-LS to serve as an alternative to PZT thin films in future applications.

Nanoscale characterization and local piezoelectric properties of lead-free KNN-LT-LS thin films

Science.gov (United States)

Abazari, M.; Choi, T.; Cheong, S.-W.; Safari, A.

2010-01-01

We report the observation of domain structure and piezoelectric properties of pure and Mn-doped (K0.44,Na0.52,Li0.04)(Nb0.84,Ta0.1,Sb0.06)O3 (KNN-LT-LS) thin films on SrTiO3 substrates. It is revealed that, using piezoresponse force microscopy, ferroelectric domain structure in such 500 nm thin films comprised of primarily 180° domains. This was in accordance with the tetragonal structure of the films, confirmed by relative permittivity measurements and x-ray diffraction patterns. Effective piezoelectric coefficient (d33) of the films were calculated using piezoelectric displacement curves and shown to be ~53 pm V-1 for pure KNN-LT-LS thin films. This value is among the highest values reported for an epitaxial lead-free thin film and shows a great potential for KNN-LT-LS to serve as an alternative to PZT thin films in future applications.

Development and characterization of silicone embedded distributed piezoelectric sensors for contact detection

International Nuclear Information System (INIS)

Acer, Merve; Salerno, Marco; Paik, Jamie; Agbeviade, Kossi

2015-01-01

Tactile sensing transfers complex interactive information in a most intuitive sense. Such a populated set of data from the environment and human interactions necessitates various degrees of information from both modular and distributed areas. A sensor design that could provide such types of feedback becomes challenging when the target component has a nonuniform, agile, high resolution, and soft surface. This paper presents an innovative methodology for the manufacture of novel soft sensors that have a high resolution sensing array due to the sensitivity of ceramic piezoelectric (PZT) elements, while uncommonly matched with the high stretchability of the soft substrate and electrode design. Further, they have a low profile and their transfer function is easy to tune by changing the material and thickness of the soft substrate in which the PZTs are embedded. In this manuscript, we present experimental results of the soft sensor prototypes: PZTs arranged in a four by two array form, measuring 1.5–2.3 mm in thickness, with the sensitivity in the range of 0.07–0.12 of the normalized signal change per unit force. We have conducted extensive tests under dynamic loading conditions that include impact, step and cyclic. The presented prototype's mechanical and functional capacities are promising for applications in biomedical systems where soft, wearable and high precision sensors are needed. (paper)

Development and characterization of silicone embedded distributed piezoelectric sensors for contact detection

Science.gov (United States)

Acer, Merve; Salerno, Marco; Agbeviade, Kossi; Paik, Jamie

2015-07-01

Tactile sensing transfers complex interactive information in a most intuitive sense. Such a populated set of data from the environment and human interactions necessitates various degrees of information from both modular and distributed areas. A sensor design that could provide such types of feedback becomes challenging when the target component has a nonuniform, agile, high resolution, and soft surface. This paper presents an innovative methodology for the manufacture of novel soft sensors that have a high resolution sensing array due to the sensitivity of ceramic piezoelectric (PZT) elements, while uncommonly matched with the high stretchability of the soft substrate and electrode design. Further, they have a low profile and their transfer function is easy to tune by changing the material and thickness of the soft substrate in which the PZTs are embedded. In this manuscript, we present experimental results of the soft sensor prototypes: PZTs arranged in a four by two array form, measuring 1.5-2.3 mm in thickness, with the sensitivity in the range of 0.07-0.12 of the normalized signal change per unit force. We have conducted extensive tests under dynamic loading conditions that include impact, step and cyclic. The presented prototype's mechanical and functional capacities are promising for applications in biomedical systems where soft, wearable and high precision sensors are needed.

Far infrared and Raman response in tetragonal PZT ceramic films

Energy Technology Data Exchange (ETDEWEB)

Buixaderas, E.; Kadlec, C.; Vanek, P.; Drnovsek, S.; Ursic, H.; Malic, B.

2015-07-01

PbZr{sub 0}.38Ti{sub 0}.62O{sub 3} and PbZr{sub 0}.36Ti{sub 0}.64{sub O}3 thick films deposited by screen printing on (0 0 0 1) single crystal sapphire substrates and prepared at two different sintering temperatures, were studied by Fourier-transform infrared reflectivity, time-domain TH{sub z} transmission spectroscopy and micro-Raman spectroscopy. The dielectric response is discussed using the Lichtenecker model to account for the porosity of the films and to obtain the dense bulk dielectric functions. Results are compared with bulk tetragonal PZT 42/58 ceramics. The dynamic response in the films is dominated by an overdamped lead-based vibration in the TH{sub z} range, as known in PZT, but its evaluated dielectric contribution is affected by the porosity and roughness of the surface. (Author)

Characterization of advanced piezoelectric materials in the wide temperature range

Energy Technology Data Exchange (ETDEWEB)

Burianova, L.; Kopal, A.; Nosek, J

2003-05-25

We report about methods and results of our measurements of piezoelectric, dielectric and elastic properties of piezoelectric materials like crystals, ceramics, composites, polymers and thin layer composites. Among the methods, used in our laboratories are: the resonance method working in the temperature range 208-358 K, hydrostatic methods, both static and dynamic in the range 273-333 K, laser interferometric methods, using single and double-beam interferometer, working at room temperature, single and double-beam micro-interferometers, working inside of optical cryostat in the range 150-330 K, and pulse echo method for measurements of elastic coefficients, using ultrasonic set, working at room temperature. In our earlier papers we reported about some of our results of piezoelectric measurements of PZT ceramics using resonance method and laser interferometric method. The results of both methods were in good agreement. Now, the measurements are realized on 0-3 ceramic-polymer composites and thin layer composites. It is well known, that both intrinsic (material) and extrinsic (domain structure) contributions to properties of ferroelectric samples have characteristic, sometimes rather strong, temperature dependence. Therefore, any extension of temperature range of the above mentioned methods is welcomed.

Electro-Caloric Properties of BT/PZT Multilayer Thin Films Prepared by Sol-Gel Method.

Science.gov (United States)

Kwon, Min-Su; Lee, Sung-Gap; Kim, Kyeong-Min

2018-09-01

In this study, Barium Titanate (BT)/Lead Zirconate Titanate (PZT) multilayer thin films were fabricated by the spin-coating method on Pt (200 nm)/Ti (10 nm) SiO2 (100 nm)/P-Si (100) substrates using BaTiO3 and Pb(Zr0.90Ti0.10)O3 metal alkoxide solutions. The coating and heating procedure was repeated several times to form the multilayer thin films. All of BT/PZT multilayer thin films show X-ray diffraction patterns typical to a polycrystalline perovskite structure and a uniform and void free grain microstructure. The thickness of the BT and PZT film by one-cycle of drying/sintering was approximately 50 nm and all of the films consisted of fine grains with a flat surface morphology. The electrocaloric properties of BT/PZT thin films were investigated by indirect estimation. The results showed that the temperature change ΔT can be calculated as a function of temperature using Maxwell's relation; the temperature change reaches a maximum value of ~1.85 °C at 135 °C under an applied electric field of 260 kV/cm.

No linealidad del efecto piezoelectrico directo d33 en cerámicas PZT