WorldWideScience

Sample records for high-aspect-ratio silicon microcolumns

  1. High aspect ratio transmission line circuits micromachined in silicon

    Science.gov (United States)

    Todd, Shane Truman

    The performance of complimentary metal-oxide-semiconductor (CMOS) monolithic microwave integrated circuits (MMICs) fabricated on silicon has improved dramatically. The scaling down of silicon transistors has increased the maximum frequency of transistors to the point where silicon MMICs have become a viable alternative to compound semiconductor MMICs in certain applications. A fundamental problem still exists in silicon MMICs however in that transmission lines fabricated on silicon can suffer from high loss due to the finite conductivity of the silicon substrate. A novel approach for creating low-loss transmission lines on silicon is presented in this work. Low-loss transmission lines are created on low resistivity silicon by using a micromachining method that combines silicon deep reactive ion etching (DRIE), thermal oxidation, electroplating, and planarization. Two types of high aspect ratio transmission lines are created with this method including high aspect ratio coplanar waveguide (hicoplanar) and semi-rectangular coaxial (semicoaxial). Transmission lines with impedances ranging from 20--80 O have been fabricated with minimum measured loss lower than 1 dB/cm at 67 GHz. Low-loss dielectrics are created for the high aspect ratio transmission lines using the mesa merging method. The mesa merging method works by creating silicon mesa arrays using DRIE and then converting and merging the mesa arrays into a solid oxide dielectric using thermal oxidation. The transmission lines are designed so that the fields penetrate the low-loss oxide dielectric and are isolated from the lossy silicon substrate. The mesa merging method has successfully created large volume oxide with depth up to 65 microm and width up to 240 microm in short oxidation times. Other advantages of the high aspect ratio transmission lines are demonstrated including low-loss over a wide impedance range, high isolation, and high coupling for coupled-line circuits. Transmission line models have been

  2. High aspect ratio channels in glass and porous silicon

    Energy Technology Data Exchange (ETDEWEB)

    Liang, H.D. [Centre for Ion Beam Applications (CIBA), Department of Physics, National University of Singapore, Singapore 117542 (Singapore); Nanoscience and Nanotechnology Initiative (NNI), National University of Singapore, Singapore 117411 (Singapore); Dang, Z.Y. [Centre for Ion Beam Applications (CIBA), Department of Physics, National University of Singapore, Singapore 117542 (Singapore); Wu, J.F. [Centre for Ion Beam Applications (CIBA), Department of Physics, National University of Singapore, Singapore 117542 (Singapore); Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117583 (Singapore); Kan, J.A. van; Qureshi, S. [Centre for Ion Beam Applications (CIBA), Department of Physics, National University of Singapore, Singapore 117542 (Singapore); Ynsa, M.D.; Torres-Costa, V. [Department of Applied Physics, Universidad Autónoma de Madrid, Madrid, Campus de Cantoblanco, 28049 Madrid (Spain); Centro de Micro-Análisis de Materiales (CMAM), Universidad Autónoma de Madrid, Campus de Cantoblanco Edif. 22, Faraday 3, E-28049 Madrid (Spain); Maira, A. [Department of Applied Physics, Universidad Autónoma de Madrid, Madrid, Campus de Cantoblanco, 28049 Madrid (Spain); Venkatesan, T.V. [Nanoscience and Nanotechnology Initiative (NNI), National University of Singapore, Singapore 117411 (Singapore); Breese, M.B.H., E-mail: phymbhb@nus.edu.sg [Centre for Ion Beam Applications (CIBA), Department of Physics, National University of Singapore, Singapore 117542 (Singapore)

    2017-03-01

    We have developed a micromachining process to produce high-aspect-ratio channels and holes in glass and porous silicon. Our process utilizes MeV proton beam irradiation of silicon using direct writing with a focused beam, followed by electrochemical etching. To increase throughput we have also developed another process for large area ion irradiation based on a radiation-resistant gold surface mask, allowing many square inches to be patterned. We present a study of the achievable channel width, depth and period and sidewall verticality for a range of channels which can be over 100 μm deep or 100 nm wide with aspect ratios up to 80. This process overcomes the difficulty of machining glass on a micro- and nanometer scale which has limited many areas of applications in different fields such as microelectronics and microfluidics.

  3. High aspect ratio channels in glass and porous silicon

    Science.gov (United States)

    Liang, H. D.; Dang, Z. Y.; Wu, J. F.; van Kan, J. A.; Qureshi, S.; Ynsa, M. D.; Torres-Costa, V.; Maira, A.; Venkatesan, T. V.; Breese, M. B. H.

    2017-03-01

    We have developed a micromachining process to produce high-aspect-ratio channels and holes in glass and porous silicon. Our process utilizes MeV proton beam irradiation of silicon using direct writing with a focused beam, followed by electrochemical etching. To increase throughput we have also developed another process for large area ion irradiation based on a radiation-resistant gold surface mask, allowing many square inches to be patterned. We present a study of the achievable channel width, depth and period and sidewall verticality for a range of channels which can be over 100 μm deep or 100 nm wide with aspect ratios up to 80. This process overcomes the difficulty of machining glass on a micro- and nanometer scale which has limited many areas of applications in different fields such as microelectronics and microfluidics.

  4. Patterned growth of high aspect ratio silicon wire arrays at moderate temperature

    Science.gov (United States)

    Morin, Christine; Kohen, David; Tileli, Vasiliki; Faucherand, Pascal; Levis, Michel; Brioude, Arnaud; Salem, Bassem; Baron, Thierry; Perraud, Simon

    2011-04-01

    High aspect ratio silicon wire arrays with excellent pattern fidelity over wafer-scale area were grown by chemical vapor deposition at moderate temperature, using a gas mixture of silane and hydrogen chloride. An innovative two-step process was developed for in situ doping of silicon wires by diborane. This process led to high p-type doping levels, up to 10 18-10 19 cm -3, without degradation of the silicon wire array pattern fidelity.

  5. Cryogenic Etching of High Aspect Ratio 400 nm Pitch Silicon Gratings.

    Science.gov (United States)

    Miao, Houxun; Chen, Lei; Mirzaeimoghri, Mona; Kasica, Richard; Wen, Han

    2016-10-01

    The cryogenic process and Bosch process are two widely used processes for reactive ion etching of high aspect ratio silicon structures. This paper focuses on the cryogenic deep etching of 400 nm pitch silicon gratings with various etching mask materials including polymer, Cr, SiO2 and Cr-on-polymer. The undercut is found to be the key factor limiting the achievable aspect ratio for the direct hard masks of Cr and SiO2, while the etch selectivity responds to the limitation of the polymer mask. The Cr-on-polymer mask provides the same high selectivity as Cr and reduces the excessive undercut introduced by direct hard masks. By optimizing the etching parameters, we etched a 400 nm pitch grating to ≈ 10.6 μm depth, corresponding to an aspect ratio of ≈ 53.

  6. A simple method for fabrication of high-aspect-ratio all-silicon grooves

    Energy Technology Data Exchange (ETDEWEB)

    Ma, Yuncan; Pan, An; Si, Jinhai, E-mail: jinhaisi@mail.xjtu.edu.cn; Chen, Tao; Chen, Feng; Hou, Xun

    2013-11-01

    A simple method using 800-nm femtosecond laser irradiation and chemical selective etching has been proposed for fabrication of high-aspect-ratio all-silicon grooves. Grooves with the maximum aspect ratio of 44 were produced. A scanning electronic microscopy equipped with an energy dispersive X-ray spectroscopy was employed to characterize the morphology and chemical composition of the grooves respectively. The formation mechanism of the grooves was attributed to the chemical reaction of the laser induced refractive index change microstructures and hydrofluoric acid solution. The dependences of the aspect ratio of the grooves on the laser irradiation parameters, such as: the numerical aperture of the microscope objective lens, the laser average power and the laser scanning velocity, are discussed.

  7. Fabrication of novel AFM probe with high-aspect-ratio ultra-sharp three-face silicon nitride tips

    NARCIS (Netherlands)

    Vermeer, Rolf; Berenschot, Erwin; Sarajlic, Edin; Tas, Niels; Jansen, Henri

    2014-01-01

    In this paper we present the wafer-scale fabrication of molded AFM probes with high aspect ratio ultra-sharp three-plane silicon nitride tips. Using (111) silicon wafers a dedicated process is developed to fabricate molds in the silicon wafer that have a flat triangular bottom surface enclosed by th

  8. Etching of Silicon in HBr Plasmas for High Aspect Ratio Features

    Science.gov (United States)

    Hwang, Helen H.; Meyyappan, M.; Mathad, G. S.; Ranade, R.

    2002-01-01

    Etching in semiconductor processing typically involves using halides because of the relatively fast rates. Bromine containing plasmas can generate high aspect ratio trenches, desirable for DRAM and MEMS applications, with relatively straight sidewalk We present scanning electron microscope images for silicon-etched trenches in a HBr plasma. Using a feature profile simulation, we show that the removal yield parameter, or number of neutrals removed per incident ion due to all processes (sputtering, spontaneous desorption, etc.), dictates the profile shape. We find that the profile becomes pinched off when the removal yield is a constant, with a maximum aspect ratio (AR) of about 5 to 1 (depth to height). When the removal yield decreases with increasing ion angle, the etch rate increases at the comers and the trench bottom broadens. The profiles have ARs of over 9:1 for yields that vary with ion angle. To match the experimentally observed etched time of 250 s for an AR of 9:1 with a trench width of 0.135 microns, we find that the neutral flux must be 3.336 x 10(exp 17)sq cm/s.

  9. High aspect ratio silicon nanowires control fibroblast adhesion and cytoskeleton organization.

    Science.gov (United States)

    Andolfi, Laura; Murello, Anna; Cassese, Damiano; Ban, Jelena; Dal Zilio, Simone; Lazzarino, Marco

    2017-04-18

    Cell-cell and cell-matrix interactions are essential to the survival and proliferation of most cells, and are responsible for triggering a wide range of biochemical pathways. More recently, the biomechanical role of those interactions was highlighted, showing, for instance, that adhesion forces are essential for cytoskeleton organization. Silicon nanowires (Si NWs) with their small size, high aspect ratio and anisotropic mechanical response represent a useful model to investigate the forces involved in the adhesion processes and their role in cellular development. In this work we explored and quantified, by single cell force spectroscopy (SCFS), the interaction of mouse embryonic fibroblasts with a flexible forest of Si NWs. We observed that the cell adhesion forces are comparable to those found on collagen and bare glass coverslip, analogously the membrane tether extraction forces are similar to that on collagen but stronger than that on bare flat glass. Cell survival did not depend significantly on the substrate, although a reduced proliferation after 36 h was observed. On the contrary both cell morphology and cytoskeleton organization revealed striking differences. The cell morphology on Si-NW was characterized by a large number of filopodia and a significant decrease of the cell mobility. The cytoskeleton organization was characterized by the absence of actin fibers, which were instead dominant on collagen and flat glass support. Such findings suggest that the mechanical properties of disordered Si NWs, and in particular their strong asymmetry, play a major role in the adhesion, morphology and cytoskeleton organization processes. Indeed, while adhesion measurements by SCFS provide out-of-plane forces values consistent with those measured on conventional substrates, weaker in-plane forces hinder proper cytoskeleton organization and migration processes.

  10. Highly Manufacturable Deep (Sub-Millimeter) Etching Enabled High Aspect Ratio Complex Geometry Lego-Like Silicon Electronics

    KAUST Repository

    Ghoneim, Mohamed T.

    2017-02-01

    A highly manufacturable deep reactive ion etching based process involving a hybrid soft/hard mask process technology shows high aspect ratio complex geometry Lego-like silicon electronics formation enabling free-form (physically flexible, stretchable, and reconfigurable) electronic systems.

  11. A sub-atmospheric chemical vapor deposition process for deposition of oxide liner in high aspect ratio through silicon vias.

    Science.gov (United States)

    Lisker, Marco; Marschmeyer, Steffen; Kaynak, Mehmet; Tekin, Ibrahim

    2011-09-01

    The formation of a Through Silicon Via (TSV) includes a deep Si trench etching and the formation of an insulating layer along the high-aspect-ratio trench and the filling of a conductive material into the via hole. The isolation of the filling conductor from the silicon substrate becomes more important for higher frequencies due to the high coupling of the signal to the silicon. The importance of the oxide thickness on the via wall isolation can be verified using electromagnetic field simulators. To satisfy the needs on the Silicon dioxide deposition, a sub-atmospheric chemical vapor deposition (SA-CVD) process has been developed to deposit an isolation oxide to the walls of deep silicon trenches. The technique provides excellent step coverage of the 100 microm depth silicon trenches with the high aspect ratio of 20 and more. The developed technique allows covering the deep silicon trenches by oxide and makes the high isolation of TSVs from silicon substrate feasible which is the key factor for the performance of TSVs for mm-wave 3D packaging.

  12. Etching high aspect ratio structures in silicon using sulfur hexafluoride/oxygen plasma

    Science.gov (United States)

    Belen, Rodolfo Jun

    Plasma etching of high aspect ratio structures in Si is an important step in manufacturing capacitors for memory devices and integrated components of microelectromechanical systems. In these applications, the goal is to etch deep features anisotropically with high etch rates and selectivities to the mask while maintaining good uniformity and reproducibility. This study investigates the etching of deep sub-half-micron diameter holes in Si using SF6/O 2 plasma. Etching experiments and plasma diagnostics are combined with modeling to gain a fundamental understanding of the etching and passivation kinetics and mechanism necessary in developing and scaling-up processes. Etching experiments are conducted in an inductively coupled plasma reactor with a planar coil. The substrate electrode is biased with a separate rf power supply to achieve independent control of the ion flux and energy. The effects of pressure, rf-bias and SF6-to-O2 ratio in the feed gas on the etch rate, selectivity and feature profile shape are studied using Si wafers patterned with 0.35 mum-diameter holes in a SiO2 mask. Visualization of profiles using scanning electron microscopy is complemented by plasma diagnostics such as mass spectrometry and actinometry. Simultaneous with experiments, reactor-scale and feature-scale models are developed to quantify the etching and passivation kinetics and identify the important kinetic parameters that affect feature profile evolution. Information from plasma diagnostics and previously published data are used to reduce the degrees of freedom in the model. Experiments are designed to directly measure kinetic parameters such as the chemical etch rate constant and the incidence angle dependence of the etching yield. Experimentally inaccessible parameters such as the sticking coefficients, etching yield and ion scattering parameters are determined through feature profile simulation. The key internal plasma parameters that affect profile evolution are the F-to-O and F

  13. High-aspect-ratio silicon-cell metallization technical status report. Final report

    Energy Technology Data Exchange (ETDEWEB)

    1982-01-01

    Two features of the silicon concentrator solar cell are addressed which affect output at high concentration levels. The first is the development of narrow but high electroplated grid lines with improved conductivity. The object is a reduction in cell series resistance without increase in shadowing. This goal is accomplished by electroplating through a thick photo resist mask to produce lines .7 mil wide by .7 mil high. Advance pulse plating techniques are combined with pure silver plating baths to produce a deposit conductivity equal to the bulk silver conductivity (a 1.5 to 2 X improvement over conventional silver plating). The second feature is a double diffused selectively textured front surface. This development employs a deep diffusion in the silicon under the grid lines. Only the non grid line open area is selectively texture etched removing the deep junction. This open textured area is then given a second shallow diffusion for optimum cell efficiency. This selective procedure maintains the original highly polished wafer surface under the grid lines so that high resolution narrow grid lines are possible. The double diffusion protects the junction from metal diffusion while enabling the optimum shallow junction in the illuminated regions. Combining these two features has produced a large area concentrator cells (8 cm/sup 2/) with peak efficiency above 16% and exhibiting a broad peak efficiency extending from 50 to 175 suns above 15%.

  14. Fabrication of High Aspect Ratio Micro-Penning-Malmberg Gold Plated Silicon Trap Arrays

    CERN Document Server

    Narimannezhad, Alireza; Weber, Marc H; Lynn, Kelvin G

    2013-01-01

    Acquiring a portable high density charged particles trap might consist of an array of micro-Penning-Malmberg traps (microtraps) with substantially lower end barriers potential than conventional Penning-Malmberg traps [1]. We report on the progress of the fabrication of these microtraps designed for antimatter storage such as positrons. The fabrication of large length to radius aspect ratio (1000:1) microtrap arrays involved advanced techniques including photolithography, deep reactive ion etching (DRIE) of silicon wafers to achieve through-vias, gold sputtering of the wafers on the surfaces and inside the vias, and thermal compression bonding of the wafers. This paper describes the encountered issues during fabrication and addresses geometry errors and asymmetries. In order to minimize the patch effects on the lifetime of the trapped positrons, the bonded stacks were gold electroplated to achieve a uniform gold surface. We show by simulation and analytical calculation that how positrons confinement time depen...

  15. Magnetic field alignment of randomly oriented, high aspect ratio silicon microwires into vertically oriented arrays.

    Science.gov (United States)

    Beardslee, Joseph A; Sadtler, Bryce; Lewis, Nathan S

    2012-11-27

    External magnetic fields have been used to vertically align ensembles of silicon microwires coated with ferromagnetic nickel films. X-ray diffraction and image analysis techniques were used to quantify the degree of vertical orientation of the microwires. The degree of vertical alignment and the minimum field strength required for alignment were evaluated as a function of the wire length, coating thickness, magnetic history, and substrate surface properties. Nearly 100% of 100 μm long, 2 μm diameter, Si microwires that had been coated with 300 nm of Ni could be vertically aligned by a 300 G magnetic field. For wires ranging from 40 to 60 μm in length, as the length of the wire increased, a higher degree of alignment was observed at lower field strengths, consistent with an increase in the available magnetic torque. Microwires that had been exposed to a magnetic sweep up to 300 G remained magnetized and, therefore, aligned more readily during subsequent magnetic field alignment sweeps. Alignment of the Ni-coated Si microwires occurred at lower field strengths on hydrophilic Si substrates than on hydrophobic Si substrates. The magnetic field alignment approach provides a pathway for the directed assembly of solution-grown semiconductor wires into vertical arrays, with potential applications in solar cells as well as in other electronic devices that utilize nano- and microscale components as active elements.

  16. Tailoring femtosecond 1.5-μm Bessel beams for manufacturing high-aspect-ratio through-silicon vias.

    Science.gov (United States)

    He, Fei; Yu, Junjie; Tan, Yuanxin; Chu, Wei; Zhou, Changhe; Cheng, Ya; Sugioka, Koji

    2017-01-18

    Three-dimensional integrated circuits (3D ICs) are an attractive replacement for conventional 2D ICs as high-performance, low-power-consumption, and small-footprint microelectronic devices. However, one of the major remaining challenges is the manufacture of high-aspect-ratio through-silicon vias (TSVs), which is a crucial technology for the assembly of 3D Si ICs. Here, we present the fabrication of high-quality TSVs using a femtosecond (fs) 1.5-μm Bessel beam. To eliminate the severe ablation caused by the sidelobes of a conventional Bessel beam, a fs Bessel beam is tailored using a specially designed binary phase plate. We demonstrate that the tailored fs Bessel beam can be used to fabricate a 2D array of approximately ∅10-μm TSVs on a 100-μm-thick Si substrate without any sidelobe damage, suggesting potential application in the 3D assembly of 3D Si ICs.

  17. Tailoring femtosecond 1.5-μm Bessel beams for manufacturing high-aspect-ratio through-silicon vias

    Science.gov (United States)

    He, Fei; Yu, Junjie; Tan, Yuanxin; Chu, Wei; Zhou, Changhe; Cheng, Ya; Sugioka, Koji

    2017-01-01

    Three-dimensional integrated circuits (3D ICs) are an attractive replacement for conventional 2D ICs as high-performance, low-power-consumption, and small-footprint microelectronic devices. However, one of the major remaining challenges is the manufacture of high-aspect-ratio through-silicon vias (TSVs), which is a crucial technology for the assembly of 3D Si ICs. Here, we present the fabrication of high-quality TSVs using a femtosecond (fs) 1.5-μm Bessel beam. To eliminate the severe ablation caused by the sidelobes of a conventional Bessel beam, a fs Bessel beam is tailored using a specially designed binary phase plate. We demonstrate that the tailored fs Bessel beam can be used to fabricate a 2D array of approximately ∅10-μm TSVs on a 100-μm-thick Si substrate without any sidelobe damage, suggesting potential application in the 3D assembly of 3D Si ICs. PMID:28098250

  18. High aspect ratio micro tool manufacturing for polymer replication using mu EDM of silicon, selective etching and electroforming

    DEFF Research Database (Denmark)

    Tosello, Guido; Bissacco, Giuliano; Tang, Peter Torben

    2008-01-01

    Mass fabrication of polymer micro components with high aspect ratio micro-structures requires high performance micro tools allowing the use of low cost replication processes such as micro injection moulding. In this regard an innovative process chain, based on a combination of micro electrical di...

  19. Electrodeposition of Gold to Conformally Fill High Aspect Ratio Nanometric Silicon Grating Trenches: A Comparison of Pulsed and Direct Current Protocols

    OpenAIRE

    Znati, Sami A.; Chedid, Nicholas; Miao, Houxun; Chen,Lei; Bennett, Eric E.; Wen, Han

    2015-01-01

    Filling high-aspect-ratio trenches with gold is a frequent requirement in the fabrication of x-ray optics as well as micro-electronic components and other fabrication processes. Conformal electrodeposition of gold in sub-micron-width silicon trenches with an aspect ratio greater than 35 over a grating area of several square centimeters is challenging and has not been described in the literature previously. A comparison of pulsed plating and constant current plating led to a gold electroplatin...

  20. Sacrificial structures for deep reactive ion etching of high-aspect ratio kinoform silicon x-ray lenses

    DEFF Research Database (Denmark)

    Stöhr, Frederik; Michael-Lindhard, Jonas; Hübner, Jörg

    2015-01-01

    investigated how sacrificial structures in the form of guarding walls and pillars may be utilized to facilitate accurate control of the etch profile. Unlike other sacrificial structuring approaches, no silicon-on-insulator substrates or multiple lithography steps are required. In addition, the safe removal...

  1. Low-temperature plasma etching of high aspect-ratio densely packed 15 to sub-10 nm silicon features derived from PS-PDMS block copolymer patterns.

    Science.gov (United States)

    Liu, Zuwei; Gu, Xiaodan; Hwu, Justin; Sassolini, Simone; Olynick, Deirdre L

    2014-07-18

    The combination of block copolymer (BCP) lithography and plasma etching offers a gateway to densely packed sub-10 nm features for advanced nanotechnology. Despite the advances in BCP lithography, plasma pattern transfer remains a major challenge. We use controlled and low substrate temperatures during plasma etching of a chromium hard mask and then the underlying substrate as a route to high aspect ratio sub-10 nm silicon features derived from BCP lithography. Siloxane masks were fabricated using poly(styrene-b-siloxane) (PS-PDMS) BCP to create either line-type masks or, with the addition of low molecular weight PS-OH homopolymer, dot-type masks. Temperature control was essential for preventing mask migration and controlling the etched feature's shape. Vertical silicon wire features (15 nm with feature-to-feature spacing of 26 nm) were etched with aspect ratios up to 17 : 1; higher aspect ratios were limited by the collapse of nanoscale silicon structures. Sub-10 nm fin structures were etched with aspect ratios greater than 10 : 1. Transmission electron microscopy images of the wires reveal a crystalline silicon core with an amorphous surface layer, just slightly thicker than a native oxide.

  2. Enhancing the Wettability of High Aspect-Ratio Through-Silicon Vias Lined with LPCVD Silicon Nitride or PE-ALD Titanium Nitride for Void-Free Bottom-Up Copper Electroplating

    NARCIS (Netherlands)

    Saadaoui, M.; van Zeijl, H.; Wien, W. H. A.; Pham, H. T. M.; Kwakernaak, C.; Knoops, H. C. M.; Kessels, W. M. M.; R. van de Sanden,; Voogt, F. C.; Roozeboom, F.; Sarro, P. M.

    2011-01-01

    One of the critical steps toward producing void-free and uniform bottom-up copper electroplating in high aspect-ratio (AR) through-silicon vias (TSVs) is the ability of the copper electrolyte to spontaneously flow through the entire depth of the via. This can be accomplished by reducing the concentr

  3. High Aspect Ratio Semiconductor Heterojunction Solar Cells

    Energy Technology Data Exchange (ETDEWEB)

    Redwing, Joan [Pennsylvania State Univ., University Park, PA (United States). Dept. of Material Science and Engineering; Mallouk, Tom [Pennsylvania State Univ., University Park, PA (United States). Dept. of Chemistry; Mayer, Theresa [Pennsylvania State Univ., University Park, PA (United States). Dept. of Electrical Engineering; Dickey, Elizabeth [Pennsylvania State Univ., University Park, PA (United States). Dept. of Materials Science and Engineering; Wronski, Chris [Pennsylvania State Univ., University Park, PA (United States). Dept. of Electrical Engineering

    2013-05-17

    The project focused on the development of high aspect ratio silicon heterojunction (HARSH) solar cells. The solar cells developed in this study consisted of high density vertical arrays of radial junction silicon microwires/pillars formed on Si substrates. Prior studies have demonstrated that vertical Si wire/pillar arrays enable reduced reflectivity and improved light trapping characteristics compared to planar solar cells. In addition, the radial junction structure offers the possibility of increased carrier collection in solar cells fabricated using material with short carrier diffusion lengths. However, the high junction and surface area of radial junction Si wire/pillar array devices can be problematic and lead to increased diode leakage and enhanced surface recombination. This study investigated the use of amorphous hydrogenated Si in the form of a heterojunction-intrinsic-thin layer (HIT) structure as a junction formation method for these devices. The HIT layer structure has widely been employed to reduce surface recombination in planar crystalline Si solar cells. Consequently, it was anticipated that it would also provide significant benefits to the performance of radial junction Si wire/pillar array devices. The overall goals of the project were to demonstrate a HARSH cell with a HIT-type structure in the radial junction Si wire/pillar array configuration and to develop potentially low cost pathways to fabricate these devices. Our studies demonstrated that the HIT structure lead to significant improvements in the open circuit voltage (Voc>0.5) of radial junction Si pillar array devices compared to devices fabricated using junctions formed by thermal diffusion or low pressure chemical vapor deposition (LPCVD). In addition, our work experimentally demonstrated that the radial junction structure lead to improvements in efficiency compared to comparable planar devices for devices fabricated using heavily doped Si that had reduced carrier diffusion

  4. Noise of Embedded High Aspect Ratio Nozzles

    Science.gov (United States)

    Bridges, James E.

    2011-01-01

    A family of high aspect ratio nozzles were designed to provide a parametric database of canonical embedded propulsion concepts. Nozzle throat geometries with aspect ratios of 2:1, 4:1, and 8:1 were chosen, all with convergent nozzle areas. The transition from the typical round duct to the rectangular nozzle was designed very carefully to produce a flow at the nozzle exit that was uniform and free from swirl. Once the basic rectangular nozzles were designed, external features common to embedded propulsion systems were added: extended lower lip (a.k.a. bevel, aft deck), differing sidewalls, and chevrons. For the latter detailed Reynolds-averaged Navier-Stokes (RANS) computational fluid dynamics (CFD) simulations were made to predict the thrust performance and to optimize parameters such as bevel length, and chevron penetration and azimuthal curvature. Seventeen of these nozzles were fabricated at a scale providing a 2.13 inch diameter equivalent area throat." ! The seventeen nozzles were tested for far-field noise and a few data were presented here on the effect of aspect ratio, bevel length, and chevron count and penetration. The sound field of the 2:1 aspect ratio rectangular jet was very nearly axisymmetric, but the 4:1 and 8:1 were not, the noise on their minor axes being louder than the major axes. Adding bevel length increased the noise of these nozzles, especially on their minor axes, both toward the long and short sides of the beveled nozzle. Chevrons were only added to the 2:1 rectangular jet. Adding 4 chevrons per wide side produced some decrease at aft angles, but increased the high frequency noise at right angles to the jet flow. This trend increased with increasing chevron penetration. Doubling the number of chevrons while maintaining their penetration decreased these effects. Empirical models of the parametric effect of these nozzles were constructed and quantify the trends stated above." Because it is the objective of the Supersonics Project that

  5. Laser desorption ionization and peptide sequencing on laser induced silicon microcolumn arrays

    Science.gov (United States)

    Vertes, Akos [Reston, VA; Chen, Yong [San Diego, CA

    2011-12-27

    The present invention provides a method of producing a laser-patterned silicon surface, especially silicon wafers for use in laser desorption ionization (LDI-MS) (including MALDI-MS and SELDI-MS), devices containing the same, and methods of testing samples employing the same. The surface is prepared by subjecting a silicon substrate to multiple laser shots from a high-power picosecond or femtosecond laser while in a processing environment, e.g., underwater, and generates a remarkable homogenous microcolumn array capable of providing an improved substrate for LDI-MS.

  6. Self-organization and FORC-based magnetic characterization of ultra-high aspect ratio epitaxial Co nanostrips produced by oblique deposition on an ordered step-bunched silicon surface

    Science.gov (United States)

    Ognev, A. V.; Ermakov, K. S.; Samardak, A. Yu; Kozlov, A. G.; Sukovatitsina, E. V.; Davydenko, A. V.; Chebotkevich, L. A.; Stancu, A.; Samardak, A. S.

    2017-03-01

    Further development of microelectronics requires novel or improved technological approaches for device nanofabrication and functional properties characterization. In this paper, we studied the crystal structure and magnetic properties of epitaxial Co nanostrips with the average width of 32.6, 45.3, and 62.6 nm grown on a step-bunched Si(111)5.55 × 5.55-Cu/Cu surface. Technological conditions, under which the ultra-high aspect ratio (˜104) structurally solid, straight nanostrips of hcp-Co with crystallographic axis [0001] oriented along their long side can be grown, were determined. The dependence of the coercive force on the width of the nanostrips was demonstrated. Magnetization reversal through the transverse domain-wall nucleation and propagation in a Co nanostrip was defined with an analytical approach based on the Stoner-Wohlfarth model. Using the first-order reversal curve method, we analyzed the effect of nanostrip uniformity degree on magnetic behavior and the influence of the magnetostatic interactions on the coercive force of individual nanostrips.

  7. Scattering and extinction from high-aspect-ratio trenches

    DEFF Research Database (Denmark)

    Roberts, Alexander Sylvester; Søndergaard, Thomas; Chirumamilla, Manohar;

    2015-01-01

    We construct a semi-analytical model describing the scattering, extinction and absorption properties of a high aspect-ratio trench in a metallic film. We find that these trenches act as highly efficient scatterers of free waves. In the perfect conductor limit, which for many metals is approached...

  8. Fabrication of high-aspect ratio SU-8 micropillar arrays

    DEFF Research Database (Denmark)

    Amato, Letizia; Keller, Stephan S.; Heiskanen, Arto

    2012-01-01

    SU-8 is the preferred photoresist for development and fabrication of high aspect ratio (HAR) three dimensional patterns. However, processing of SU-8 is a challenging task, especially when the film thickness as well as the aspect ratio is increasing and the size of the features is close to the res...

  9. Different methods to alter surface morphology of high aspect ratio structures

    Energy Technology Data Exchange (ETDEWEB)

    Leber, M., E-mail: moritz.leber@utah.edu [Department of Electrical and Computer Engineering, University of Utah, Salt Lake City, UT (United States); Shandhi, M.M.H. [Department of Electrical and Computer Engineering, University of Utah, Salt Lake City, UT (United States); Hogan, A. [Blackrock Microsystems, Salt Lake City, UT (United States); Solzbacher, F. [Department of Electrical and Computer Engineering, University of Utah, Salt Lake City, UT (United States); Bhandari, R.; Negi, S. [Department of Electrical and Computer Engineering, University of Utah, Salt Lake City, UT (United States); Blackrock Microsystems, Salt Lake City, UT (United States)

    2016-03-01

    Graphical abstract: Surface engineering of high aspect ratio silicon structures. - Highlights: • Multiple roughening techniques for high aspect ratio devices were investigated. • Modification of surface morphology of high aspect ratio silicon devices (1:15). • Decrease of 76% in impedance proves significant increase in surface area. - Abstract: In various applications such as neural prostheses or solar cells, there is a need to alter the surface morphology of high aspect ratio structures so that the real surface area is greater than geometrical area. The change in surface morphology enhances the devices functionality. One of the applications of altering the surface morphology is of neural implants such as the Utah electrode array (UEA) that communicate with single neurons by charge injection induced stimulation or by recording electrical neural signals. For high selectivity between single cells of the nervous system, the electrode surface area is required to be as small as possible, while the impedance is required to be as low as possible for good signal to noise ratios (SNR) during neural recording. For stimulation, high charge injection and charge transfer capacities of the electrodes are required, which increase with the electrode surface. Traditionally, researchers have worked with either increasing the roughness of the existing metallization (platinum grey, black) or other materials such as Iridium Oxide and PEDOT. All of these previously investigated methods lead to more complicated metal deposition processes that are difficult to control and often have a critical impact on the mechanical properties of the metal films. Therefore, a modification of the surface underneath the electrode's coating will increase its surface area while maintaining the standard and well controlled metal deposition process. In this work, the surfaces of the silicon micro-needles were engineered by creating a defined microstructure on the electrodes surface using several

  10. Aeroelastic stability analysis of high aspect ratio aircraft wings

    OpenAIRE

    Banerjee, J. R.; Liu, X.; Kassem, H. I.

    2014-01-01

    Free vibration and flutter analyses of two types of high aspect ratio aircraft wings are presented. The wing is idealised as an assembly of bending-torsion coupled beams using the dynamic stiffness method leading to a nonlinear eigenvalue problem. This problem is solved using the Wattrick-Williams algorithm yielding natural frequencies and mode shapes. The flutter analysis is carried out using the normal mode method in conjunction with generalised coordinates and two-dimensional unsteady aero...

  11. High aspect ratio 3D nanopatterning using Proton Beam Writing

    Science.gov (United States)

    van Kan, Jeroen A.

    2009-03-01

    Proton beam writing (PBW) is a new direct write lithography using MeV protons, and is unique because of its ability to fabricate 3D structures of high aspect ratio structures directly in resist material like PMMA, SU-8 and HSQ. The introduction by CIBA, Singapore of a dedicated PBW facility, capable of writing at the micro- and nano- scale has facilitated high aspect ratio nanostructuring. PBW has demontrated high aspect ratio walls in HSQ down to the 20nm level. In recent experiments details down to sub 20 nm have been achieved in PMMA. Monte-Carlo calculations have shown that structuring down to the nanometer level is feasible. All this is possible because of the virtual absence of proximity effects (unwanted resist exposure by stray secondary electrons). The design and performance of this unique nanoprobe facility will be discussed. Two potential fields of application (eg nanofluidics and nanowire integration) of PBW will be discussed. Currently nanofluidics devices have typically only one critical dimension below 100 nm. Here we will introduce PBW as a powerful technique to fabricate molds for replication of PDMS nanofluidic circuits down to the sub 100 nm level in two dimensions. Initial chips with dimension down to 150 nm have successfully been used to study DNA folding in quasi-1d nanochannels in tandem with fluorescence imaging. Since the size of these PDMS nanochannels is not limited by the PDMS or PBW further miniaturization down to the sub 100 nm level is a realistic goal and initial results will be discussed. Nanowires are a potential building block for nano-electronic devices, and one critical problem is the integration of nanowires to form contacts. Porous alumina templates and high energy ion-tracks have been used for the production of nanowire templates in a random orientation. Since PBW is the only true 3D direct write nanolithographic technique it can be used to fabricate nanowire templates in a controlled manner.

  12. Injection molding of high aspect ratio sub-100 nm nanostructures

    DEFF Research Database (Denmark)

    Matschuk, Maria; Larsen, Niels B

    2013-01-01

    with FDTS. Reduced adhesion forces are consistent with lowered friction that reduces the risk of fracturing the nanoscopic pillars during demolding. Optimized mold surface chemistry and associated injection molding conditions permitted the fabrication of square arrays of 40 nm wide and 107 nm high (aspect......We have explored the use of mold coatings and optimized processing conditions to injection mold high aspect ratio nanostructures (height-to-width >1) in cyclic olefin copolymer (COC). Optimizing the molding parameters on uncoated nickel molds resulted in slight improvements in replication quality...

  13. Anomalous dynamic behaviour of optically trapped high aspect ratio nanowires

    CERN Document Server

    Toe, Wen Jun; Angstmann, Christopher; Gao, Qiang; Tan, Hark Hoe; Jagadish, Chennupati; Henry, Bruce; Reece, Peter J

    2015-01-01

    We investigate the dynamics of high aspect ratio nanowires trapped axially in a single gradient force optical tweezers. A power spectrum analysis of the Brownian dynamics reveals a broad spectral resonance of the order of a kHz with peak properties that are strongly dependent on the input trapping power. Modelling of the dynamical equations of motion of the trapped nanowire that incorporate non-conservative effects through asymmetric coupling between translational and rotational degrees of freedom provides excellent agreement with the experimental observations. An associated observation of persistent cyclical motion around the equilibrium trapping position using winding analysis provides further evidence for the influence of non-conservative forces.

  14. High Aspect-Ratio Neural Probes using Conventional Blade Dicing

    Science.gov (United States)

    Goncalves, S. B.; Ribeiro, J. F.; Silva, A. F.; Correia, J. H.

    2016-10-01

    Exploring deep neural circuits has triggered the development of long penetrating neural probes. Moreover, driven by brain displacement, the long neural probes require also a high aspect-ratio shafts design. In this paper, a simple and reproducible method of manufacturing long-shafts neural probes using blade dicing technology is presented. Results shows shafts up to 8 mm long and 200 µm wide, features competitive to the current state-of-art, being its outline simply accomplished by a single blade dicing program. Therefore, conventional blade dicing presents itself as a viable option to manufacture long neural probes.

  15. High-aspect ratio magnetic nanocomposite polymer cilium

    Science.gov (United States)

    Rahbar, M.; Tseng, H. Y.; Gray, B. L.

    2014-03-01

    This paper presents a new fabrication technique to achieve ultra high-aspect ratio artificial cilia micro-patterned from flexible highly magnetic rare earth nanoparticle-doped polymers. We have developed a simple, inexpensive and scalable fabrication method to create cilia structures that can be actuated by miniature electromagnets, that are suitable to be used for lab-on-a chip (LOC) and micro-total-analysis-system (μ-TAS) applications such as mixers and flow-control elements. The magnetic cilia are fabricated and magnetically polarized directly in microfluidic channels or reaction chambers, allowing for easy integration with complex microfluidic systems. These cilia structures can be combined on a single chip with other microfluidic components employing the same permanently magnetic nano-composite polymer (MNCP), such as valves or pumps. Rare earth permanent magnetic powder, (Nd0.7Ce0.3)10.5Fe83.9B5.6, is used to dope polydimethylsiloxane (PDMS), resulting in a highly flexible M-NCP of much higher magnetization and remanence [1] than ferromagnetic polymers typically employed in magnetic microfluidics. Sacrificial poly(ethylene-glycol) (PEG) is used to mold the highly magnetic polymer into ultra high-aspect ratio artificial cilia. Cilia structures with aspect ratio exceeding 8:0.13 can be easily fabricated using this technique and are actuated using miniature electromagnets to achieve a high range of motion/vibration.

  16. Formation of High Aspect Ratio Microcoil Using Dipping Method

    Science.gov (United States)

    Noda, Daiji; Yamashita, Shuhei; Matsumoto, Yoshifumi; Setomoto, Masaru; Hattori, Tadashi

    Coils are used in many electronic devices as inductors in mobile units such as mobile phone, digital cameras, etc. Inductance and quality factor of coils are very important value of the performance. Therefore, the requests for coils are small size, high inductance, low power consumption, etc. However, coils are unsuitable for miniaturization because of its structure. Therefore, we have proposed and developed the microcoils of high aspect ratio with the dipping method and an X-ray lithography technique. In dipping method, centrifugal force and highly viscous photoresist solution were key points to evenly apply resist in the form of thick film on metal bar. The film thickness of resist on bar was achieved about 50 μm after single coating. Using these techniques, we succeeded in creating threaded groove structure with 10 μm lines and spaces on 1 mm brass bar. In this case, the aspect ratio was achieved five. It is very expected the high performance microcoil with high aspect ratio lines could be manufactured in spite of the miniature size.

  17. Growth of high aspect ratio ZnO nanorods by solution process: Effect of polyethyleneimine

    Energy Technology Data Exchange (ETDEWEB)

    Choi, Han-Seok; Vaseem, Mohammad; Kim, Sang Gon; Im, Yeon-Ho [School of Semiconductor and Chemical Engineering, Dept. of BIN Fusion Technology, BK 21 Centre for Future Energy Materials and Devices, and Nanomaterials Processing Research Center, Chonbuk National University, Jeonju 561-756 (Korea, Republic of); Hahn, Yoon-Bong, E-mail: ybhahn@chonbuk.ac.kr [School of Semiconductor and Chemical Engineering, Dept. of BIN Fusion Technology, BK 21 Centre for Future Energy Materials and Devices, and Nanomaterials Processing Research Center, Chonbuk National University, Jeonju 561-756 (Korea, Republic of)

    2012-05-15

    High aspect ratio ZnO nanorods were grown vertically on ZnO seed layer deposited silicon, glass and polyimide substrates by a solution process at low-temperature using zinc nitrate hexahydrate and hexamethylenetetramine. We studied the effect of polyethlyeneimine (PEI) on the growth of ZnO nanorods. It was found that PEI has a prominent effect on controlling the aspect ratio of ZnO nanorods in solution. The morphological and photoluminescence properties of the ZnO nanorods were also examined with varying the growth temperature (60-90 Degree-Sign C). - Graphical abstract: With addition of polyehyleneimine (PEI) high aspect-ratio ZnO nanorods were grown. It is believed that during ZnO nanorods growth, protonized form of linear PEI molecules inhibits the lateral growth by being adsorbed on non-polar lateral planes. Thus the vertical growth is favored. Highlights: Black-Right-Pointing-Pointer A controlled growth of high aspect ratio ZnO nanorods on different substrates. Black-Right-Pointing-Pointer A prominent effect of polyethlyeneimine (PEI) on controlling the aspect ratio of ZnO nanorods in solution. Black-Right-Pointing-Pointer Precursor concentration and growth temperature effect for various aspect ratio ZnO nanorods.

  18. Improving acousto-optical interaction by high aspect ratio electrodes

    DEFF Research Database (Denmark)

    Dühring, Maria Bayard

    In recent years experiments have shown that optical waves in waveguides can be modulated by mechanical stresses from surface acoustic waves (SAW), which have most of their energy density concentrated at the surface. In these experiments the SAWs are generated in piezoelectric materials...... by conventional interdigital transducers consisting of thin electrodes deposited at the surface. In this work the finite element method is employed to investigate if the acousto-optical interaction can be enhanced by generating the SAWs by interdigital transducers consisting of high aspect ratio electrodes....... With a periodic model it is first shown that these tall electrodes introduce several new confined SAW modes with slow phase velocities because of mechanical energy storage in the electrodes. The periodic model is then extended to a finite model by using perfectly matched layers at the substrate borders...

  19. Dielectric spectroscopy of high aspect ratio graphene-polyurethane nanocomposites

    Science.gov (United States)

    Jan, Rahim; Habib, Amir; Abbassi, Hina; Amir, Shahid

    2015-03-01

    High aspect ratio graphene nanosheets (GNS), prepared via liquid exfoliation, are homogeneously dispersed in thermoplastic polyurethane (TPU). Dielectric spectroscopy results are reported for these nanocomposites (up to 0.55 vol. % GNS) in the frequency range of 100 Hz to 5 MHz. The as-prepared GNS increased the AC conductivity 10-1000 times across the given frequency range. The dielectric constant is increased 5-6 times at 100 Hz for the maximum loading of GNS when compared with the pristine TPU, with subsequently high dielectric loss making them a suitable candidate for high energy dissipation applications such as EMI shielding. The temperature effects on the dielectric characteristics of 0.55 vol. % GNS/TPU nanocomposites beyond 400 K are more pronounced due to the interfacial and orientation polarization. Mechanical characteristics evaluation of GNS/TPU composites shows a marked increase in the ultimate tensile strength without compromising their ductility and stiffness. [Figure not available: see fulltext.

  20. Large eddy simulation of a high aspect ratio combustor

    Science.gov (United States)

    Kirtas, Mehmet

    The present research investigates the details of mixture preparation and combustion in a two-stroke, small-scale research engine with a numerical methodology based on large eddy simulation (LES) technique. A major motivation to study such small-scale engines is their potential use in applications requiring portable power sources with high power density. The investigated research engine has a rectangular planform with a thickness very close to quenching limits of typical hydrocarbon fuels. As such, the combustor has a high aspect ratio (defined as the ratio of surface area to volume) that makes it different than the conventional engines which typically have small aspect ratios to avoid intense heat losses from the combustor in the bulk flame propagation period. In most other aspects, this engine involves all the main characteristics of traditional reciprocating engines. A previous experimental work has identified some major design problems and demonstrated the feasibility of cyclic combustion in the high aspect ratio combustor. Because of the difficulty of carrying out experimental studies in such small devices, resolving all flow structures and completely characterizing the flame propagation have been an enormously challenging task. The numerical methodology developed in this work attempts to complement these previous studies by providing a complete evolution of flow variables. Results of the present study demonstrated strengths of the proposed methodology in revealing physical processes occuring in a typical operation of the high aspect ratio combustor. For example, in the scavenging phase, the dominant flow structure is a tumble vortex that forms due to the high velocity reactant jet (premixed) interacting with the walls of the combustor. Since the scavenging phase is a long process (about three quarters of the whole cycle), the impact of the vortex is substantial on mixture preparation for the next combustion phase. LES gives the complete evolution of this flow

  1. High aspect ratio MEMS capacitor for high frequency impedance matching applications

    DEFF Research Database (Denmark)

    Yalcinkaya, Arda Deniz; Jensen, Søren; Hansen, Ole

    2003-01-01

    We present a microelectromechanical tunable capacitor with a low control voltage, a wide tuning range and adequate electrical quality factor. The device is fabricated in a single-crystalline silicon layer using deep reactive ion etching (DRIE) for obtaining high-aspect ratio (> 20) parallel comb-...... response and it was found that the device is a suitable passive component to be used in impedance matching applications, band-pass filtering or voltage controlled oscillators in the Very High Frequency (VHF) and Ultra High Frequency (UHF) bands.......We present a microelectromechanical tunable capacitor with a low control voltage, a wide tuning range and adequate electrical quality factor. The device is fabricated in a single-crystalline silicon layer using deep reactive ion etching (DRIE) for obtaining high-aspect ratio (> 20) parallel comb......-drive structures with vertical sidewalls. The process sequence for fabrication of the devices uses only one lithographic masking step and can be completed in a short time. The fabricated device was characterized with respect to electrical quality factor, tuning range, self-resonance frequency and transient...

  2. Combined AFM nano-machining and reactive ion etching to fabricate high aspect ratio structures.

    Science.gov (United States)

    Peng, Ping; Shi, Tielin; Liao, Guanglan; Tang, Zirong

    2010-11-01

    In this paper, a new combined method of sub-micron high aspect ratio structure fabrication is developed which can be used for production of nano imprint template. The process includes atomic force microscope (AFM) scratch nano-machining and reactive ion etching (RIE) fabrication. First, 40 nm aluminum film was deposited on the silicon substrate by magnetron sputtering, and then sub-micron grooves were fabricated on the aluminum film by nano scratch using AFM diamond tip. As aluminum film is a good mask for etching silicon, high aspect ratio structures were finally fabricated by RIE process. The fabricated structures were studied by SEM, which shows that the grooves are about 400 nm in width and 5 microm in depth. To obtain sub-micron scale groove structures on the aluminum film, experiments of nanomachining on aluminum films under various machining conditions were conducted. The depths of the grooves fabricated using different scratch loads were also studied by the AFM. The result shows that the material properties of the film/substrate are elastic-plastic following nearly a bilinear law with isotropic strain hardening. Combined AFM nanomachining and RIE process provides a relative lower cost nano fabrication technique than traditional e-beam lithography, and it has a good prospect in nano imprint template fabrication.

  3. The Capabilities of Electrodischarge Microdrilling of High Aspect Ratio Holes in Ceramic Materials

    Directory of Open Access Journals (Sweden)

    Skoczypiec Sebastian

    2015-09-01

    Full Text Available In the first part of the article the review of ceramic materials drilling possibilities was presented. Among the described methods special attention is paid to electrodischarge drilling. This process have especially been predicted for machining difficult-to-cut electrically conductive materials. The second part consist of the results analysis of electrodischarge microdrilling of siliconized silicon carbide. The experiment involves the impact of current amplitude, discharge voltage and pulse time on the hole depth, side gap, linear tool wear and mean drilling speed. The results shows that electrodischarge drilling is a good alternative when machining inhomogeneous ceramic materials and gives possibility to drill high aspect ratio holes with relatively high efficiency (the drilling speed >2 mm/min.

  4. Different methods to alter surface morphology of high aspect ratio structures

    Science.gov (United States)

    Leber, M.; Shandhi, M. M. H.; Hogan, A.; Solzbacher, F.; Bhandari, R.; Negi, S.

    2016-03-01

    In various applications such as neural prostheses or solar cells, there is a need to alter the surface morphology of high aspect ratio structures so that the real surface area is greater than geometrical area. The change in surface morphology enhances the devices functionality. One of the applications of altering the surface morphology is of neural implants such as the Utah electrode array (UEA) that communicate with single neurons by charge injection induced stimulation or by recording electrical neural signals. For high selectivity between single cells of the nervous system, the electrode surface area is required to be as small as possible, while the impedance is required to be as low as possible for good signal to noise ratios (SNR) during neural recording. For stimulation, high charge injection and charge transfer capacities of the electrodes are required, which increase with the electrode surface. Traditionally, researchers have worked with either increasing the roughness of the existing metallization (platinum grey, black) or other materials such as Iridium Oxide and PEDOT. All of these previously investigated methods lead to more complicated metal deposition processes that are difficult to control and often have a critical impact on the mechanical properties of the metal films. Therefore, a modification of the surface underneath the electrode's coating will increase its surface area while maintaining the standard and well controlled metal deposition process. In this work, the surfaces of the silicon micro-needles were engineered by creating a defined microstructure on the electrodes surface using several methods such as laser ablation, focused ion beam, sputter etching, reactive ion etching (RIE) and deep reactive ion etching (DRIE). The surface modification processes were optimized for the high aspect ratio silicon structures of the UEA. The increase in real surface area while maintaining the geometrical surface area was verified using scanning electron

  5. Large-scale high aspect ratio Al-doped ZnO nanopillars arrays as anisotropic metamaterials

    DEFF Research Database (Denmark)

    Shkondin, Evgeniy; Takayama, Osamu; Panah, Mohammad Esmail Aryaee

    2017-01-01

    High aspect ratio free-standing Al-doped ZnO (AZO) nanopillars and nanotubes were fabricated using a combination of advanced reactive ion etching and atomic layer deposition (ALD) techniques. Prior to the pillar and tube fabrication, AZO layers were grown on flat silicon and glass substrates...... plasma frequency. During pillar fabrication, AZO conformally passivates the silicon template, which is characteristic of typical ALD growth conditions. The last step of fabrication is heavily dependent on the selective chemistry of the SF6 plasma. It was shown that silicon between AZO structures can...

  6. Nanofabrication of high aspect ratio structures using an evaporated resist containing metal

    Science.gov (United States)

    Con, Celal; Zhang, Jian; Cui, Bo

    2014-05-01

    Organic electron beam resists are typically not resistant to the plasma etching employed to transfer the pattern into the underlying layer. Here, the authors present the incorporation of a metal hard mask material into negative resist polystyrene by co-evaporation of the polystyrene and the metal onto a substrate. With a volume ratio of 1:15 between Cr and polystyrene, this nanocomposite resist showed an etching selectivity to silicon one order higher than pure polystyrene resist. Silicon structures of 100 nm width and 3.5 μm height (aspect ratio 1:35) were obtained using a non-switching deep silicon etching recipe with SF6 and C4F8 gas. Moreover, unlike the common spin coating method, evaporated nanocomposite resist can be coated onto irregular and non-flat surfaces such as optical fibers and AFM cantilevers. As a proof of concept, we fabricated high aspect ratio structures on top of an AFM cantilever. Nanofabrication on non-flat surfaces may find applications in the fields of (AFM) tip enhanced Raman spectroscopy for chemical analysis and lab-on-fiber technology.

  7. Shape matters: synthesis and biomedical applications of high aspect ratio magnetic nanomaterials

    OpenAIRE

    Raluca M Fratila; Rivera-Fernández, Sara; Fuente, Jesús M. de la

    2015-01-01

    High aspect ratio magnetic nanomaterials possess anisotropic properties that make them attractive for biological applications. Their elongated shape enables multivalent interactions with receptors through the introduction of multiple targeting units on their surface, thus enhancing cell internalization. Moreover, due to their magnetic anisotropy, high aspect ratio nanomaterials can outperform their spherical analogues as contrast agents for magnetic resonance imaging (MRI) applications. In th...

  8. Dielectrophoretically structured piezoelectric composites with high aspect ratio piezoelectric particles inclusions

    NARCIS (Netherlands)

    Ende, D.A. van den; Kempen, S.E. van; Wu, X.; Groen, W.A.; Randall, C.A.; Zwaag, S. van der

    2012-01-01

    Piezoelectric composites were prepared by dielectrophoretic alignment of high aspect ratio piezoelectric particles in a thermosetting polymer matrix. A high level of alignment was achieved in the cured composite from a resin containing randomly oriented high aspect ratio particles. Upon application

  9. Hot punching of high-aspect-ratio 3D polymeric microstructures for drug delivery

    DEFF Research Database (Denmark)

    Petersen, Ritika Singh; Keller, Stephan Sylvest; Boisen, Anja

    2015-01-01

    Hot punching: a highly versatile method of fabricating high-aspect-ratio 3D microstructures for drug delivery with good replication fidelity and yield.......Hot punching: a highly versatile method of fabricating high-aspect-ratio 3D microstructures for drug delivery with good replication fidelity and yield....

  10. High-speed microprobe for roughness measurements in high-aspect-ratio microstructures

    Science.gov (United States)

    Doering, Lutz; Brand, Uwe; Bütefisch, Sebastian; Ahbe, Thomas; Weimann, Thomas; Peiner, Erwin; Frank, Thomas

    2017-03-01

    Cantilever-type silicon microprobes with an integrated tip and a piezoresistive signal read out have successfully proven to bridge the gap between scanning force microscopy and stylus profilometry. Roughness measurements in high-aspect-ratio microstructures (HARMS) with depths down to 5 mm and widths down to 50 µm have been demonstrated. To improve the scanning speed up to 15 mm s‑1, the wear of the tip has to be reduced. The atomic layer deposition (ALD) technique with alumina (Al2O3) has been tested for this purpose. Repeated wear measurements with coated and uncoated microprobe cantilevers have been carried out on a roughness standard at a speed of 15 mm s‑1. The tip shape and the wear have been measured using a new probing tip reference standard containing rectangular silicon grooves with widths from 0.3 µm to 3 µm. The penetration depth of the microprobe allows one to measure the wear of the tip as well as the tip width and the opening angle of the tip. The roughness parameters obtained on the roughness standard during wear experiments agree well with the reference values measured with a calibrated stylus instrument, nevertheless a small amount of wear still is observable. Further research is necessary in order to obtain wear resistant microprobe tips for non-destructive inspection of microstructures in industry and microform measurements, for example in injection nozzles.

  11. Ultra-high aspect ratio replaceable AFM tips using deformation-suppressed focused ion beam milling

    DEFF Research Database (Denmark)

    Savenko, Alexey; Yildiz, Izzet; Petersen, Dirch Hjorth;

    2013-01-01

    Fabrication of ultra-high aspect ratio exchangeable and customizable tips for atomic force microscopy (AFM) using lateral focused ion beam (FIB) milling is presented. While on-axis FIB milling does allow high aspect ratio (HAR) AFM tips to be defined, lateral milling gives far better flexibility...... FIB milling strategies for obtaining sharper tips are discussed. Finally, assembly of the HAR tips on a custom-designed probe as well as the first AFM scanning is shown....

  12. Fabrication of high aspect ratio nanocell lattices by ion beam irradiation

    Energy Technology Data Exchange (ETDEWEB)

    Ishikawa, Osamu [School of Environmental Science and Technology, Kochi University of Technology, Tosayamada, Kami, Kochi 782-8502 (Japan); Nitta, Noriko, E-mail: nitta.noriko@kochi-tech.ac.jp [School of Environmental Science and Technology, Kochi University of Technology, Tosayamada, Kami, Kochi 782-8502 (Japan); Center for Nanotechnology, Research Institute, Kochi University of Technology, Tosayamada, Kami, Kochi 782-8502 (Japan); Taniwaki, Masafumi [School of Environmental Science and Technology, Kochi University of Technology, Tosayamada, Kami, Kochi 782-8502 (Japan)

    2016-11-01

    Highlights: • Nanocell lattice with a high aspect ratio on InSb semiconductor surface was fabricated by ion beam irradiation. • The fabrication technique consisting of top-down and bottom-up processes was performed in FIB. • High aspect ratio of 2 was achieved in nanocell lattice with a 100 nm interval. • The intermediate-flux irradiation is favorable for fabrication of nanocell with a high aspect ratio. - Abstract: A high aspect ratio nanocell lattice was fabricated on the InSb semiconductor surface using the migration of point defects induced by ion beam irradiation. The fabrication technique consisting of the top-down (formation of voids and holes) and bottom-up (growth of voids and holes into nanocells) processes was performed using a focused ion beam (FIB) system. A cell aspect ratio of 2 (cell height/cell diameter) was achieved for the nanocell lattice with a 100 nm dot interval The intermediate-flux ion irradiation during the bottom-up process was found to be optimal for the fabrication of a high aspect ratio nanocell.

  13. Shape matters: synthesis and biomedical applications of high aspect ratio magnetic nanomaterials.

    Science.gov (United States)

    Fratila, Raluca M; Rivera-Fernández, Sara; de la Fuente, Jesús M

    2015-05-14

    High aspect ratio magnetic nanomaterials possess anisotropic properties that make them attractive for biological applications. Their elongated shape enables multivalent interactions with receptors through the introduction of multiple targeting units on their surface, thus enhancing cell internalization. Moreover, due to their magnetic anisotropy, high aspect ratio nanomaterials can outperform their spherical analogues as contrast agents for magnetic resonance imaging (MRI) applications. In this review, we first describe the two main synthetic routes for the preparation of anisotropic magnetic nanomaterials: (i) direct synthesis (in which the anisotropic growth is directed by tuning the reaction conditions or by using templates) and (ii) assembly methods (in which the high aspect ratio is achieved by assembly from individual building blocks). We then provide an overview of the biomedical applications of anisotropic magnetic nanomaterials: magnetic separation and detection, targeted delivery and magnetic resonance imaging.

  14. Synthesis of high aspect ratio ZnO nanowires with an inexpensive handcrafted electrochemical setup

    Science.gov (United States)

    Taheri, Ali; Saramad, Shahyar; Setayeshi, Saeed

    2016-12-01

    In this work, high aspect ratio zinc oxide nanowires are synthesized using templated one-step electrodeposition technique. Electrodeposition of the nanowires is done using a handcrafted electronic system. Nuclear track-etched polycarbonate membrane is used as a template to form the high aspect ratio nanowires. The result of X-ray diffraction and scanning electron microscopy shows that nanowires with a good crystallinity and an aspect ratio of more than 30 can be achieved in a suitable condition. The height of electrodeposited nanowires reaches to about 11 μm. Based on the obtained results, high aspect ratio ZnO nanowires can be formed using inexpensive electrodeposition setup with an acceptable quality.

  15. Development of high-aspect-ratio microchannel heat exchanger based on multi-tool milling process

    Institute of Scientific and Technical Information of China (English)

    潘敏强; 李金恒; 汤勇

    2008-01-01

    A high-aspect-ratio microchannel heat exchanger based on multi-tool milling process was developed. Several slotting cutters were stacked together for simultaneously machining several high-aspect-ratio microchannels with manifold structures. On the basis of multi-tool milling process, the structural design of the manifold side height, microchannel length, width, number, and interval were analyzed. The heat transfer performances of high-aspect-ratio microchannel heat exchangers with two different manifolds were investigated by experiments, and the influencing factors were analyzed. The results indicate that the magnitude of heat transfer area per unit volume dominates the heat transfer performances of plate-type micro heat exchanger, while the velocity distribution between microchannels has little effects on the heat transfer performances.

  16. Shape matters: synthesis and biomedical applications of high aspect ratio magnetic nanomaterials

    Science.gov (United States)

    Fratila, Raluca M.; Rivera-Fernández, Sara; de La Fuente, Jesús M.

    2015-04-01

    High aspect ratio magnetic nanomaterials possess anisotropic properties that make them attractive for biological applications. Their elongated shape enables multivalent interactions with receptors through the introduction of multiple targeting units on their surface, thus enhancing cell internalization. Moreover, due to their magnetic anisotropy, high aspect ratio nanomaterials can outperform their spherical analogues as contrast agents for magnetic resonance imaging (MRI) applications. In this review, we first describe the two main synthetic routes for the preparation of anisotropic magnetic nanomaterials: (i) direct synthesis (in which the anisotropic growth is directed by tuning the reaction conditions or by using templates) and (ii) assembly methods (in which the high aspect ratio is achieved by assembly from individual building blocks). We then provide an overview of the biomedical applications of anisotropic magnetic nanomaterials: magnetic separation and detection, targeted delivery and magnetic resonance imaging.

  17. Fabrication of high aspect ratio nanogrid transparent electrodes via capillary assembly of Ag nanoparticles

    Science.gov (United States)

    Kang, Juhoon; Park, Chang-Goo; Lee, Su-Han; Cho, Changsoon; Choi, Dae-Geun; Lee, Jung-Yong

    2016-05-01

    In this report, we describe the fabrication of periodic Ag nanogrid electrodes by capillary assembly of silver nanoparticles (AgNPs) along patterned nanogrid templates. By assembling the AgNPs into these high-aspect-ratio nanogrid patterns, we can obtain high-aspect-ratio nanogratings, which can overcome the inherent trade-off between the optical transmittance and the sheet resistance of transparent electrodes. The junction resistance between the AgNPs is effectively reduced by photochemical welding and post-annealing. The fabricated high-aspect-ratio nanogrid structure with a line width of 150 nm and a height of 450 nm has a sheet resistance of 15.2 Ω sq-1 and an optical transmittance of 85.4%.In this report, we describe the fabrication of periodic Ag nanogrid electrodes by capillary assembly of silver nanoparticles (AgNPs) along patterned nanogrid templates. By assembling the AgNPs into these high-aspect-ratio nanogrid patterns, we can obtain high-aspect-ratio nanogratings, which can overcome the inherent trade-off between the optical transmittance and the sheet resistance of transparent electrodes. The junction resistance between the AgNPs is effectively reduced by photochemical welding and post-annealing. The fabricated high-aspect-ratio nanogrid structure with a line width of 150 nm and a height of 450 nm has a sheet resistance of 15.2 Ω sq-1 and an optical transmittance of 85.4%. Electronic supplementary information (ESI) available. See DOI: 10.1039/c6nr01896c

  18. Physical Delivery of Macromolecules using High-Aspect Ratio Nanostructured Materials.

    Science.gov (United States)

    Lee, Kunwoo; Lingampalli, Nithya; Pisano, Albert P; Murthy, Niren; So, Hongyun

    2015-10-28

    There is great need for the development of an efficient delivery method of macromolecules, including nucleic acids, proteins, and peptides, to cell cytoplasm without eliciting toxicity or changing cell behavior. High-aspect ratio nanomaterials have addressed many challenges present in conventional methods, such as cell membrane passage and endosomal degradation, and have shown the feasibility of efficient high-throughput macromolecule delivery with minimal perturbation of cells. This review describes the recent advances of in vitro and in vivo physical macromolecule delivery with high-aspect ratio nanostructured materials and summarizes the synthesis methods, material properties, relevant applications, and various potential directions.

  19. Sharp high-aspect-ratio AFM tips fabricated by a combination of deep reactive ion etching and focused ion beam techniques.

    Science.gov (United States)

    Caballero, David; Villanueva, Guillermo; Plaza, Jose Antonio; Mills, Christopher A; Samitier, Josep; Errachid, Abdelhamid

    2010-01-01

    The shape and dimensions of an atomic force microscope tip are crucial factors to obtain high resolution images at the nanoscale. When measuring samples with narrow trenches, inclined sidewalls near 90 degrees or nanoscaled structures, standard silicon atomic force microscopy (AFM) tips do not provide satisfactory results. We have combined deep reactive ion etching (DRIE) and focused ion beam (FIB) lithography techniques in order to produce probes with sharp rocket-shaped silicon AFM tips for high resolution imaging. The cantilevers were shaped and the bulk micromachining was performed using the same DRIE equipment. To improve the tip aspect ratio we used FIB nanolithography technique. The tips were tested on narrow silicon trenches and over biological samples showing a better resolution when compared with standard AFM tips, which enables nanocharacterization and nanometrology of high-aspect-ratio structures and nanoscaled biological elements to be completed, and provides an alternative to commercial high aspect ratio AFM tips.

  20. Modeling and characterization of dielectrophoretically structured piezoelectric composites using piezoceramic particle inclusions with high aspect ratios

    NARCIS (Netherlands)

    Ende, D.A. van den; Maier, R.A.; Neer, P.L.M.J. van; Zwaag, S. van der; Randall, C.A.; Groen, W.A.

    2013-01-01

    In this work, the piezoelectric properties at high electric fields of dielectrophoretically aligned PZT - polymer composites containing high aspect ratio particles (such as short fibers) are presented. Polarization and strain as a function of electric field are evaluated. The properties of the compo

  1. Improving surface acousto-optical interaction by high aspect ratio electrodes

    DEFF Research Database (Denmark)

    Dühring, Maria Bayard; Laude, Vincent; Khelif, Abdelkrim

    2009-01-01

    The acousto-optical interaction of an optical wave confined inside a waveguide and a surface acoustic wave launched by an interdigital transducer (IDT) at the surface of a piezoelectric material is considered. The IDT with high aspect ratio electrodes supports several acoustic modes that are stro...

  2. Dense high-aspect ratio 3D carbon pillars on interdigitated microelectrode arrays

    DEFF Research Database (Denmark)

    Amato, Letizia; Heiskanen, Arto; Hansen, Rasmus

    2015-01-01

    In this work we present high-aspect ratio carbon pillars (1.4 μm in diameter and ∼11 μm in height) on top of interdigitated electrode arrays to be used for electrochemical applications. For this purpose, different types of 2D and 3D pyrolysed carbon structures were fabricated and characterised...

  3. Thermo-mechanical properties of high aspect ratio silica nanofiber filled epoxy composites

    Science.gov (United States)

    Ren, Liyun

    The optimization of thermo-mechanical properties of polymer composites at low filler loadings is of great interest in both engineering and scientific fields. There have been several studies on high aspect ratio fillers as novel reinforcement phase for polymeric materials. However, facile synthesis method of high aspect ratio nanofillers is limited. In this study, a scalable synthesis method of high aspect ratio silica nanofibers is going to be presented. I will also demonstrate that the inclusion of high aspect ratio silica nanofibers in epoxy results in a significant improvement of epoxy thermo-mechanical properties at low filler loadings. With silica nanofiber concentration of 2.8% by volume, the Young's modulus, ultimate tensile strength and fracture toughness of epoxy increased ~23, ~28 and ~50%, respectively, compared to unfilled epoxy. At silica nanofiber volume concentration of 8.77%, the thermal expansion coefficient decreased by ˜40% and the thermal conductivity was improved by ˜95% at room temperature. In the current study, the influence of nano-sized silica filler aspect ratio on mechanical and thermal behavior of epoxy nanocomposites were studied by comparing silica nanofibers to spherical silica nanoparticles (with aspect ratio of one) at various filler loadings. The significant reinforcement of composite stiffness is attributed to the variation of the local stress state in epoxy due to the high aspect ratio of the silica nanofiber and the introduction of a tremendous amount of interfacial area between the nanofillers and the epoxy matrix. The fracture mechanisms of silica nanofiber filled epoxy were also investigated. The existence of high aspect ratio silica nanofiber promotes fracture energy dissipation by crack deflection, crack pinning as well as debonding with fiber pull-out leading to enhanced fracture toughness. High aspect ratio fillers also provide significant reduction of photon scattering due to formation of a continuous fiber network

  4. A 3-dimensional in vitro model of epithelioid granulomas induced by high aspect ratio nanomaterials

    Directory of Open Access Journals (Sweden)

    Hurt Robert H

    2011-05-01

    Full Text Available Abstract Background The most common causes of granulomatous inflammation are persistent pathogens and poorly-degradable irritating materials. A characteristic pathological reaction to intratracheal instillation, pharyngeal aspiration, or inhalation of carbon nanotubes is formation of epithelioid granulomas accompanied by interstitial fibrosis in the lungs. In the mesothelium, a similar response is induced by high aspect ratio nanomaterials, including asbestos fibers, following intraperitoneal injection. This asbestos-like behaviour of some engineered nanomaterials is a concern for their potential adverse health effects in the lungs and mesothelium. We hypothesize that high aspect ratio nanomaterials will induce epithelioid granulomas in nonadherent macrophages in 3D cultures. Results Carbon black particles (Printex 90 and crocidolite asbestos fibers were used as well-characterized reference materials and compared with three commercial samples of multiwalled carbon nanotubes (MWCNTs. Doses were identified in 2D and 3D cultures in order to minimize acute toxicity and to reflect realistic occupational exposures in humans and in previous inhalation studies in rodents. Under serum-free conditions, exposure of nonadherent primary murine bone marrow-derived macrophages to 0.5 μg/ml (0.38 μg/cm2 of crocidolite asbestos fibers or MWCNTs, but not carbon black, induced macrophage differentiation into epithelioid cells and formation of stable aggregates with the characteristic morphology of granulomas. Formation of multinucleated giant cells was also induced by asbestos fibers or MWCNTs in this 3D in vitro model. After 7-14 days, macrophages exposed to high aspect ratio nanomaterials co-expressed proinflammatory (M1 as well as profibrotic (M2 phenotypic markers. Conclusions Induction of epithelioid granulomas appears to correlate with high aspect ratio and complex 3D structure of carbon nanotubes, not with their iron content or surface area. This model

  5. An implicit wetting and drying approach for non-hydrostatic flows in high aspect ratio domains

    CERN Document Server

    Candy, Adam S

    2013-01-01

    A wetting and drying approach for free surface flows governed by the three-dimensional, non-hydrostatic Navier-Stokes equations in high aspect ratio domains is developed. This has application in the modelling of inundation processes in geophysical domains, where dynamics takes place over a large horizontal extent relative to vertical resolution, such as in the evolution of a tsunami, or an urban fluvial flooding scenario. The approach is novel in that it solves for three dimensional dynamics in these very high aspect ratio domains, to include non-hydrostatic effects and accurately model dispersive processes. These become important in shallow regions with steep gradients, a particularly acute problem where man-made structures exist such as buildings or flood defences in an urban environment. It is implicit in time to allow efficient time integration over a range of mesh element sizes. Specific regularisation methods are introduced to improve conditioning of the full three-dimensional pressure Poisson problem i...

  6. Light emitting diode with high aspect ratio submicron roughness for light extraction and methods of forming

    Science.gov (United States)

    Li, Ting

    2013-08-13

    The surface morphology of an LED light emitting surface is changed by applying a reactive ion etch (RIE) process to the light emitting surface. High aspect ratio, submicron roughness is formed on the light emitting surface by transferring a thin film metal hard-mask having submicron patterns to the surface prior to applying a reactive ion etch process. The submicron patterns in the metal hard-mask can be formed using a low cost, commercially available nano-patterned template which is transferred to the surface with the mask. After subsequently binding the mask to the surface, the template is removed and the RIE process is applied for time duration sufficient to change the morphology of the surface. The modified surface contains non-symmetric, submicron structures having high aspect ratio which increase the efficiency of the device.

  7. Fabrication of nanopore and nanoparticle arrays with high aspect ratio AAO masks

    Science.gov (United States)

    Li, Z. P.; Xu, Z. M.; Qu, X. P.; Wang, S. B.; Peng, J.; Mei, L. H.

    2017-03-01

    How to use high aspect ratio anodic aluminum oxide (AAO) membranes as an etching and evaporation mask is one of the unsolved problems in the application of nanostructured arrays. Here we describe the versatile utilizations of the highly ordered AAO membranes with a high aspect ratio of more than 20 used as universal masks for the formation of various nanostructure arrays on various substrates. The result shows that the fabricated nanopore and nanoparticle arrays of substrates inherit the regularity of the AAO membranes completely. The flat AAO substrates and uneven AAO frontages were attached to the Si substrates respectively as an etching mask, which demonstrates that the two kinds of replication, positive and negative, represent the replication of the mirroring of Si substrates relative to the flat AAO substrates and uneven AAO frontages. Our work is a breakthrough for the broad research field of surface nano-masking.

  8. A review on non-linear aeroelasticity of high aspect-ratio wings

    Science.gov (United States)

    Afonso, Frederico; Vale, José; Oliveira, Éder; Lau, Fernando; Suleman, Afzal

    2017-02-01

    Current economic constraints and environmental regulations call for design of more efficient aircraft configurations. An observed trend in aircraft design to reduce the lift induced drag and improve fuel consumption and emissions is to increase the wing aspect-ratio. However, a slender wing is more flexible and subject to higher deflections under the same operating conditions. This effect may lead to changes in dynamic behaviour and in aeroelastic response, potentially resulting in instabilities. Therefore, it is important to take into account geometric non-linearities in the design of high aspect-ratio wings, as well as having accurate computational codes that couple the aerodynamic and structural models in the presence of non-linearities. Here, a review on the state-of-the-art on non-linear aeroelasticity of high aspect-ratio wings is presented. The methodologies employed to analyse high aspect-ratio wings are presented and their applications discussed. Important observations from the state-of-the-art studies are drawn and the current challenges in the field are identified.

  9. Flight Loads Prediction of High Aspect Ratio Wing Aircraft Using Multibody Dynamics

    Directory of Open Access Journals (Sweden)

    Michele Castellani

    2016-01-01

    Full Text Available A framework based on multibody dynamics has been developed for the static and dynamic aeroelastic analyses of flexible high aspect ratio wing aircraft subject to structural geometric nonlinearities. Multibody dynamics allows kinematic nonlinearities and nonlinear relationships in the forces definition and is an efficient and promising methodology to model high aspect ratio wings, which are known to be prone to structural nonlinear effects because of the high deflections in flight. The multibody dynamics framework developed employs quasi-steady aerodynamics strip theory and discretizes the wing as a series of rigid bodies interconnected by beam elements, representative of the stiffness distribution, which can undergo arbitrarily large displacements and rotations. The method is applied to a flexible high aspect ratio wing commercial aircraft and both trim and gust response analyses are performed in order to calculate flight loads. These results are then compared to those obtained with the standard linear aeroelastic approach provided by the Finite Element Solver Nastran. Nonlinear effects come into play mainly because of the need of taking into account the large deflections of the wing for flight loads computation and of considering the aerodynamic forces as follower forces.

  10. Fabrication of Aspheric Micro-Lens Mold with High Aspect Ratio

    Science.gov (United States)

    Naniwa, Irizo; Kanamaru, Masatoshi; Nakamura, Shigeo; Shimano, Takeshi; Horino, Masaya

    The optical pickup of our Small-Form-Factor Optical Disc Drives (SFFODDs) requires a micro-objective whose profile is composed of two aspheric surfaces. However, it is difficult to fabricate a micro-objective with an arbitrary aspheric surface and high aspect ratio using conventional techniques. We propose here a new method to fabricate an aspheric micro-lens mold with high aspect ratio. This method uses the micro-loading effect in Deep Reactive Ion Etching (DRIE) and isotropic Reactive Ion Etching (RIE). The micro-loading effect is a phenomenon that leads to different etching depths depending on the aperture size of the mask layer used in etching. We fabricated an aspheric micro-lens mold for the prototype by using the proposed method after experimental evaluations of the micro-loading effect for a feasibility study. The profile of the first prototype was slightly different from the designed one according as the distance from the lens center increase. The profile error of the second prototype was reduced by using a mask that had multiple apertures with the smallest aperture located outside the area where the crater was formed. Our proposed method was found to be effective for fabricating a micro-lens mold with an arbitrary aspheric surface and high aspect ratio.

  11. Flow visualization study in high aspect ratio cooling channels for rocket engines

    Science.gov (United States)

    Meyer, Michael L.; Giuliani, James E.

    1993-11-01

    The structural integrity of high pressure liquid propellant rocket engine thrust chambers is typically maintained through regenerative cooling. The coolant flows through passages formed either by constructing the chamber liner from tubes or by milling channels in a solid liner. Recently, Carlile and Quentmeyer showed life extending advantages (by lowering hot gas wall temperatures) of milling channels with larger height to width aspect ratios (AR is greater than 4) than the traditional, approximately square cross section, passages. Further, the total coolant pressure drop in the thrust chamber could also be reduced, resulting in lower turbomachinery power requirements. High aspect ratio cooling channels could offer many benefits to designers developing new high performance engines, such as the European Vulcain engine (which uses an aspect ratio up to 9). With platelet manufacturing technology, channel aspect ratios up to 15 could be formed offering potentially greater benefits. Some issues still exist with the high aspect ratio coolant channels. In a coolant passage of circular or square cross section, strong secondary vortices develop as the fluid passes through the curved throat region. These vortices mix the fluid and bring lower temperature coolant to the hot wall. Typically, the circulation enhances the heat transfer at the hot gas wall by about 40 percent over a straight channel. The effect that increasing channel aspect ratio has on the curvature heat transfer enhancement has not been sufficiently studied. If the increase in aspect ratio degrades the secondary flow, the fluid mixing will be reduced. Analysis has shown that reduced coolant mixing will result in significantly higher wall temperatures, due to thermal stratification in the coolant, thus decreasing the benefits of the high aspect ratio geometry. A better understanding of the fundamental flow phenomena in high aspect ratio channels with curvature is needed to fully evaluate the benefits of this

  12. Nanometer scale high-aspect-ratio trench etching at controllable angles using ballistic reactive ion etching

    Energy Technology Data Exchange (ETDEWEB)

    Cybart, Shane; Roediger, Peter; Ulin-Avila, Erick; Wu, Stephen; Wong, Travis; Dynes, Robert

    2012-11-30

    We demonstrate a low pressure reactive ion etching process capable of patterning nanometer scale angled sidewalls and three dimensional structures in photoresist. At low pressure the plasma has a large dark space region where the etchant ions have very large highly-directional mean free paths. Mounting the sample entirely within this dark space allows for etching at angles relative to the cathode with minimal undercutting, resulting in high-aspect ratio nanometer scale angled features. By reversing the initial angle and performing a second etch we create three-dimensional mask profiles.

  13. Design and Analyses of High Aspect Ratio Nozzles for Distributed Propulsion Acoustic Measurements

    Science.gov (United States)

    Dippold, Vance F., III

    2016-01-01

    A series of three convergent round-to-rectangular high-aspect ratio nozzles were designed for acoustics measurements. The nozzles have exit area aspect ratios of 8:1, 12:1, and 16:1. With septa inserts, these nozzles will mimic an array of distributed propulsion system nozzles, as found on hybrid wing-body aircraft concepts. Analyses were performed for the three nozzle designs and showed that the flow through the nozzles was free of separated flow and shocks. The exit flow was mostly uniform with the exception of a pair of vortices at each span-wise end of the nozzle.

  14. Proton beam writing and electroplating for the fabrication of high aspect ratio Au microstructures

    Energy Technology Data Exchange (ETDEWEB)

    Yue Weisheng [Centre for Ion Beam Applications, Department of Physics, National University of Singapore, Singapore 117542 (Singapore); Ren Yaping [Singapore Synchrotron Light Source, National University of Singapore, 5 Research Link, Singapore 117603 (Singapore); Kan, Jeroen Anton van; Chiam, S.-Y. [Centre for Ion Beam Applications, Department of Physics, National University of Singapore, Singapore 117542 (Singapore); Jian, Linke; Moser, Herbert O. [Singapore Synchrotron Light Source, National University of Singapore, 5 Research Link, Singapore 117603 (Singapore); Osipowicz, Thomas [Centre for Ion Beam Applications, Department of Physics, National University of Singapore, Singapore 117542 (Singapore)], E-mail: phyto@nus.edu.sg; Watt, Frank [Centre for Ion Beam Applications, Department of Physics, National University of Singapore, Singapore 117542 (Singapore)

    2009-07-01

    We present an approach to fabricate tall high aspect ratio Au microstructures by means of proton beam direct writing. Combining proton beam direct writing and electroplating, we successfully produced gold structures with sub-micrometer lateral dimensions, structure heights in excess of 11 {mu}m, and aspect ratios over 28. Sidewall quality of the Au structures was improved by lowering the process temperature to 20 deg. C when developing PMMA patterns with GG developer. The application of such structures as X-ray masks for deep X-ray lithography with synchrotron radiation was demonstrated.

  15. Wafer-scale fabrication of high-aspect ratio nanochannels based on edge-lithography technique.

    Science.gov (United States)

    Xie, Quan; Zhou, Qing; Xie, Fei; Sang, Jianming; Wang, Wei; Zhang, Haixia Alice; Wu, Wengang; Li, Zhihong

    2012-03-01

    This paper introduced a wafer-scale fabrication approach for the preparation of nanochannels with high-aspect ratio (the ratio of the channel depth to its width). Edge lithography was used to pattern nanogaps in an aluminum film, which was functioned as deep reactive ion etching mask thereafter to form the nanochannel. Nanochannels with aspect ratio up to 172 and width down to 44 nm were successfully fabricated on a 4-inch Si wafer with width nonuniformity less than 13.6%. A microfluidic chip integrated with nanometer-sized filters was successfully fabricated by utilizing the present method for geometric-controllable nanoparticle packing.

  16. Fabrication of High Aspect Ratio SU-8 Structures for Integrated Spectrometers

    DEFF Research Database (Denmark)

    Anhøj, Thomas Aarøe

    2007-01-01

    of photolithography. Successful fabrication of re ection gratings requires a high degree of precision in the photolithographic process. The fabrication process has thus been optimized by optimizing the photolithographic process for fabrication of high aspect ratio structures, i.e. structures with details...... that are small compared to the height of the structure. A decisive factor is the ability of the process to separate closely- spaced structures. The primary measure of quality is thus the aspect ratio of the narrowest trench which it is possible to resolve in the lithographic process. The optimization...

  17. Fabrication of high aspect ratio tungsten nanostructures on ultrathin c-Si membranes for extreme UV applications.

    Science.gov (United States)

    Delachat, F; Le Drogoff, B; Constancias, C; Delprat, S; Gautier, E; Chaker, M; Margot, J

    2016-01-15

    In this work, we demonstrate a full process for fabricating high aspect ratio diffraction optics for extreme ultraviolet lithography. The transmissive optics consists in nanometer scale tungsten patterns standing on flat, ultrathin (100 nm) and highly transparent (>85% at 13.5 nm) silicon membranes (diameter of 1 mm). These tungsten patterns were achieved using an innovative pseudo-Bosch etching process based on an inductively coupled plasma ignited in a mixture of SF6 and C4F8. Circular ultra-thin Si membranes were fabricated through a state-of-the-art method using direct-bonding with thermal difference. The silicon membranes were sputter-coated with a few hundred nanometers (100-300 nm) of stress-controlled tungsten and a very thin layer of chromium. Nanoscale features were written in a thin resist layer by electron beam lithography and transferred onto tungsten by plasma etching of both the chromium hard mask and the tungsten layer. This etching process results in highly anisotropic tungsten features at room temperature. The homogeneity and the aspect ratio of the advanced pattern transfer on the membranes were characterized with scanning electron microscopy after focus ion beam milling. An aspect ratio of about 6 for 35 nm size pattern is successfully obtained on a 1 mm diameter 100 nm thick Si membrane. The whole fabrication process is fully compatible with standard industrial semiconductor technology.

  18. Aqueous solution route to high-aspect-ratio zinc oxide nanostructures on indium tin oxide substrates.

    Science.gov (United States)

    Ku, Chen-Hao; Wu, Jih-Jen

    2006-07-06

    High-aspect-ratio ZnO nanowires and nanotubes are formed on indium tin oxide (ITO) substrates using a three-step route at low temperatures. The three steps, including successive ionic layer absorption and reaction (SILAR) deposition of the ZnO seed layer, hydrothermal annealing of the seed layer, and chemical bath deposition (CBD) of the one-dimensional (1D) ZnO nanostructures, are all conducted in aqueous solutions at temperatures below 120 degrees C. Both the hydrothermal annealing of the SILAR seed layer and the low-concentration precursor solution employed in the CBD process are crucial in order to synthesize the uniform and high-aspect-ratio ZnO nanostructures on the ITO substrate. TEM analyses reveal that both the nanowire and the nanotube possess the single-crystal structure and are grown along [001] direction. Room-temperature cathodoluminescence spectrum of the 1D ZnO nanostructures shows a sharp ultraviolet emission at 375 nm and a broad green-band emission.

  19. Simulation and Measurement of Neuroelectrodes' Characteristics with Integrated High Aspect Ratio Nano Structures

    Directory of Open Access Journals (Sweden)

    Christoph Nick

    2015-07-01

    Full Text Available Improving the interface between electrodes and neurons has been the focus of research for the last decade. Neuroelectrodes should show small geometrical surface area and low impedance for measuring and high charge injection capacities for stimulation. Increasing the electrochemically active surface area by using nanoporous electrode material or by integrating nanostructures onto planar electrodes is a common approach to improve this interface. In this paper a simulation approach for neuro electrodes' characteristics with integrated high aspect ratio nano structures based on a point-contact-model is presented. The results are compared with experimental findings conducted with real nanostructured microelectrodes. In particular, effects of carbon nanotubes and gold nanowires integrated onto microelectrodes are described. Simulated and measured impedance properties are presented and its effects onto the transfer function between the neural membrane potential and the amplifier output signal are studied based on the point-contact-model. Simulations show, in good agreement with experimental results, that electrode impedances can be dramatically reduced by the integration of high aspect ratio nanostructures such as gold nanowires and carbon nanotubes. This lowers thermal noise and improves the signal-to-noise ratio for measuring electrodes. It also may increase the adhesion of cells to the substrate and thus increase measurable signal amplitudes.

  20. Planarization of High Aspect Ratio P-I-N Diode Pillar Arrays for Blanket Electrical Contacts

    Energy Technology Data Exchange (ETDEWEB)

    Voss, L F; Shao, Q; Reinhardt, C E; Graff, R T; Conway, A M; Nikolic, R J; Deo, N; Cheung, C L

    2009-03-05

    Two planarization techniques for high aspect ratio three dimensional pillar structured P-I-N diodes have been developed in order to enable a continuous coating of metal on the top of the structures. The first technique allows for coating of structures with topography through the use of a planarizing photoresist followed by RIE etch back to expose the tops of the pillar structure. The second technique also utilizes photoresist, but instead allows for planarization of a structure in which the pillars are filled and coated with a conformal coating by matching the etch rate of the photoresist to the underlying layers. These techniques enable deposition using either sputtering or electron beam evaporation of metal films to allow for electrical contact to the tops of the underlying pillar structure. These processes have potential applications for many devices comprised of 3-D high aspect ratio structures. Two separate processes have been developed in order to ensure a uniform surface for deposition of an electrode on the {sup 10}Boron filled P-I-N pillar structured diodes. Each uses S1518 photoresist in order to achieve a relatively uniform surface despite the non-uniformity of the underlying detector. Both processes allow for metallization of the final structure and provide good electrical continuity over a 3D pillar structure.

  1. Diffusion of dilute gas in arrays of randomly distributed, vertically aligned, high-aspect-ratio cylinders

    Science.gov (United States)

    Guerra, Carlos

    2017-01-01

    In this work we modelled the diffusive transport of a dilute gas along arrays of randomly distributed, vertically aligned nanocylinders (nanotubes or nanowires) as opposed to gas diffusion in long pores, which is described by the well-known Knudsen theory. Analytical expressions for (i) the gas diffusion coefficient inside such arrays, (ii) the time between collisions of molecules with the nanocylinder walls (mean time of flight), (iii) the surface impingement rate, and (iv) the Knudsen number of such a system were rigidly derived based on a random-walk model of a molecule that undergoes memoryless, diffusive reflections from nanocylinder walls assuming the molecular regime of gas transport. It can be specifically shown that the gas diffusion coefficient inside such arrays is inversely proportional to the areal density of cylinders and their mean diameter. An example calculation of a diffusion coefficient is delivered for a system of titanium isopropoxide molecules diffusing between vertically aligned carbon nanotubes. Our findings are important for the correct modelling and optimisation of gas-based deposition techniques, such as atomic layer deposition or chemical vapour deposition, frequently used for surface functionalisation of high-aspect-ratio nanocylinder arrays in solar cells and energy storage applications. Furthermore, gas sensing devices with high-aspect-ratio nanocylinder arrays and the growth of vertically aligned carbon nanotubes need the fundamental understanding and precise modelling of gas transport to optimise such processes. PMID:28144565

  2. Characterization of the optical parameters of high aspect ratio polymer micro-optical components

    Science.gov (United States)

    Krajewski, Rafal; Van Erps, Jurgen; Wissmann, Markus; Kujawinska, Malgorzata; Parriaux, Olivier; Tonchev, S.; Mohr, Jurgen; Thienpont, Hugo

    2008-04-01

    Over the last decades the significant grow of interest of photonics devices is observed in various fields of applications. Due to the market demands, the current research studies are focused on the technologies providing miniaturized, reliable low-cost micro-optical systems, particularly the ones featuring the fabrication of high aspect ratio structures. A high potential of these technologies comes from the fact that fabrication process is not limited to single optical components, but entire systems integrating sets of elements could be fabricated. This could in turn result in a significant saving on the assembly and packaging costs. We present a brief overview of the most common high aspect ratio fabrication technologies for micro-optical components followed by some characterization studies of these techniques. The sidewall quality and internal homogeneity will be considered as the most crucial parameters, having an impact on the wavefront propagation in the fabricated components. We show the characterization procedure and measurement results for components prototyped with Deep Proton Writing and glass micromachining technology replicated with Hot Embossing and Elastomeric Mould Vacuum Casting technology. We discuss the pros and cons for using these technologies for the production of miniaturized interferometers blocks. In this paper we present the status of our research on the new technology chain and we show the concept of microinterferometers to be fabricated within presented technology chain.

  3. Gust response analysis and wind tunnel test for a high-aspect ratio wing

    Directory of Open Access Journals (Sweden)

    Liu Yi

    2016-02-01

    Full Text Available A theoretical nonlinear aeroelastic response analysis for a flexible high-aspect ratio wing excited by harmonic gust load is presented along with a companion wind tunnel test. A multidisciplinary coupled numerical calculation is developed to simulate the flexible model wing undergoing gust load in the time domain via discrete nonlinear finite element structural dynamic analysis and nonplanar unsteady vortex lattice aerodynamic computation. A dynamic perturbation analysis about a nonlinear static equilibrium is also used to determine the small perturbation flutter boundary. A novel noncontact 3-D camera measurement analysis system is firstly used in the wind tunnel test to obtain the spatial large deformation and responses. The responses of the flexible wing under different static equilibrium states and frequency gust loads are discussed. The fair to good quantitative agreements between the theoretical and experimental results demonstrate that the presented analysis method is an acceptable way to predict the geometrically nonlinear gust response for flexible wings.

  4. Micro precision casting based on investment casting for micro structures with high aspect ratio

    Institute of Scientific and Technical Information of China (English)

    YANG Chuang; LI Bang-sheng; REN Ming-xing; FU Heng-zhi

    2009-01-01

    Microcasting is one of the significant technologies for the production of metallic micro parts with high aspect ratio (ratio of flow length to diameter). A micro precision casting technology based on investment casting using centrifugal method was investigated. The micro parts of Zn-4%Al alloy with an aspect ratio up to 200 was produced at the centrifugal speed of 1 500 r/min and the mold temperature of 270 ℃. The investigations on the relationship between flow length and rotational speed were carried out. For microcasting, the flow length is not only dependent on the centrifugal speed under the constant centrifugal radius, but also on the preheating temperature of mold. The flow length increases as the rotational speed and the mold temperature increase, and is much higher at a mold temperature of 270 ℃ than at other mold temperatures.

  5. Measurement and simulation of jet mass caused by a high-aspect ratio pertubation

    Energy Technology Data Exchange (ETDEWEB)

    Keiter, Paul A [Los Alamos National Laboratory; Cooley, James [Los Alamos National Laboratory; Kyrala, George [Los Alamos National Laboratory; Wilson, Doug [Los Alamos National Laboratory; Blue, Brent [LLNL/GA; Elliott, Jim [LLNL; Edwards, John [LLNL; Robey, Harry [LLNL; Spears, Brian [LLNL

    2009-01-01

    Inertial confinement fusion (ICF) capsule performance can be negatively impacted by the presence of hydrodynamic instabilities. To perform a gas fill on an ICF capsule current plans involve drilling a small hole and inserting a fill tube to inject the gas mixture into the capsule. This introduces a perturbation on the capsule, which can seed hydrodynamic instabilities. The small hole can cause jetting of the shell material into the gas, which might adversely affect the capsule performance. We have performed simulations and experiments to study the hydrodynamic evolution of jets from high-aspect ratio holes, such as the fill tube hole. Although simulations using cold materials over predict the amount of mass in the jet, when a reasonable amount of preheat (< 1 eV) is introduced, the simulations are in better agreement with the experiment.

  6. Measurement and simulation of jet mass caused by a high-aspect ratio hole perturbation

    Energy Technology Data Exchange (ETDEWEB)

    Keiter, Paul A [Los Alamos National Laboratory; Cooley, James H [Los Alamos National Laboratory; Wilson, D C [Los Alamos National Laboratory; Kyrala, George A [Los Alamos National Laboratory; Blue, Brent E [LLNL; Edwards, J [LLNL; Elliott, James B [LLNL; Robey, H F [LLNL; Spears, B [Los Alamos National Laboratory

    2009-01-01

    Inertial confinement fusion (ICF) capsule performance can be negatively impacted by the presence of hydrodynamic instabilities. To perform a gas fill on an ICF capsule, current plans involve drilling a small hole and inserting a fill tube to inject the gas mixture into the capsule. This introduces a perturbation on the capsule, which can seed hydrodynamic instabilities. The small hole can cause jetting of the shell material into the gas, which might adversely affect the capsule performance. We have performed simulations and experiments to study the hydrodynamic evolution of jets from high-aspect ratio holes, such as the fill tube hole. Although simulations using cold materials overpredict the amount of mass in the jet, when a reasonable amount of preheat (<1 eV) is introduced, the simulations are in better agreement with the experiment.

  7. A new multifunctional platform based on high aspect ratio interdigitated NEMS structures

    Energy Technology Data Exchange (ETDEWEB)

    Ghatnekar-Nilsson, S; Karlsson, I; Kvennefors, A; Luo, G; Zela, V; Parker, T; Litwin, A [NEMS AB, Solvegatan 16, S-223 62 Lund (Sweden); Arlelid, M [Electrical and Information Technology, Lund University, PO Box 118, S-221 00 Lund (Sweden); Montelius, L [Solid State Physics/The Nanometer Structure Consortium, Lund University, PO Box 118, S-221 00 Lund (Sweden)], E-mail: andrej.litwin@nems.se

    2009-04-29

    A multifunctional NEMS platform based on a mass-producible, surface relief grating has been developed and fabricated directly in polymer materials. The pattern consists of high aspect ratio interdigitated nanometer-sized pairs of walls and can be produced in a low-complexity one-step patterning process with nanoimprint lithography. In this paper, we demonstrate the usefulness of the platform primarily by showing an application as a high-sensitivity mass sensor in air. The sensors, which are based on the high frequency resonant response of around 200 MHz, show a mass responsivity of the order of 0.1 Hz/zg per wall at room temperature and in ambient air. Their ability to selectively adsorb airborne target molecules, such as thiols, is also demonstrated. We also show that the same device can function as a varactor for electronic circuits based on its large tunable capacitive range.

  8. A new multifunctional platform based on high aspect ratio interdigitated NEMS structures.

    Science.gov (United States)

    Ghatnekar-Nilsson, S; Karlsson, I; Kvennefors, A; Luo, G; Zela, V; Arlelid, M; Parker, T; Montelius, L; Litwin, A

    2009-04-29

    A multifunctional NEMS platform based on a mass-producible, surface relief grating has been developed and fabricated directly in polymer materials. The pattern consists of high aspect ratio interdigitated nanometer-sized pairs of walls and can be produced in a low-complexity one-step patterning process with nanoimprint lithography. In this paper, we demonstrate the usefulness of the platform primarily by showing an application as a high-sensitivity mass sensor in air. The sensors, which are based on the high frequency resonant response of around 200 MHz, show a mass responsivity of the order of 0.1 Hz/zg per wall at room temperature and in ambient air. Their ability to selectively adsorb airborne target molecules, such as thiols, is also demonstrated. We also show that the same device can function as a varactor for electronic circuits based on its large tunable capacitive range.

  9. Hybrid UV Lithography for 3D High-Aspect-Ratio Microstructures

    Energy Technology Data Exchange (ETDEWEB)

    Park, Sungmin; Nam, Gyungmok; Kim, Jonghun; Yoon, Sang-Hee [Inha Univ, Incheon (Korea, Republic of)

    2016-08-15

    Three-dimensional (3D) high-aspect-ratio (HAR) microstructures for biomedical applications (e.g., microneedle, microadhesive, etc.) are microfabricated using the hybrid ultraviolet (UV) lithography in which inclined, rotational, and reverse-side UV exposure processes are combined together. The inclined and rotational UV exposure processes are intended to fabricate tapered axisymmetric HAR microstructures; the reverse-side UV exposure process is designed to sharpen the end tip of the microstructures by suppressing the UV reflection on a bottom substrate which is inevitable in conventional UV lithography. Hybrid UV lithography involves fabricating 3D HAR microstructures with an epoxy-based negative photoresist, SU-8, using our customized UV exposure system. The effects of hybrid UV lithography parameters on the geometry of the 3D HAR microstructures (aspect ratio, radius of curvature of the end tip, etc.) are measured. The dependence of the end-tip shape on SU-8 soft-baking condition is also discussed.

  10. Maintaining high-Q in an optical microresonator coated with high-aspect-ratio gold nanorods

    Science.gov (United States)

    Ganta, D.; Dale, E. B.; Rosenberger, A. T.

    2013-10-01

    We report methods to coat fused-silica microresonators with solution-grown high-aspect-ratio (AR) gold nanorods (NRs). Microresonators coated using our method maintain an optical quality factor (Q) greater than 107 after coating. The more successful method involves silanization of the surface of the microresonator with 3-mercaptopropylmethyldimethoxysilane (MPMDMS), to enable the adhesion of gold NRs. The high-AR NR-coated microresonator combines the field enhancement of localized surface plasmon resonances with the cavity-enhanced evanescent components of high-Q whispering-gallery modes, making it useful for plasmonic sensing applications in the infrared. By coating with NRs having a different aspect ratio, the enhancement regime can be selected within a wide range of wavelengths.

  11. Dynamics of polymer nanoparticles through a single artificial nanopore with a high-aspect-ratio.

    Science.gov (United States)

    Cabello-Aguilar, Simon; Chaaya, Adib Abou; Bechelany, Mikhael; Pochat-Bohatier, Céline; Balanzat, Emmanuel; Janot, Jean-Marc; Miele, Philippe; Balme, Sébastien

    2014-11-14

    The development of nanometric Coulter counters for nanoparticle detection is an attractive and promising field of research. In this work, we have studied the influence of the nanopore surface state on charged polymer nanoparticle translocations. To make this, the translocation of carboxylate modified polystyrene microspheres (diameter 40, 70 and 100 nm) has been investigated through two kinds of high aspect ratio nanopores (negative and uncharged). The latter were tailored by a single track-etched and atomic layer deposition technique. It was shown that the mobility and the energy barrier are strongly dependent on nanopore surface charge. Typically if the latter exhibits negative surface charge, the microsphere mobility increases and the global energy barrier of entrance inside the nanopore decreases with its diameter, converse to the uncharged nanopore.

  12. Pilot Study of Inhaled Aerosols Targeted via Magnetic Alignment of High Aspect Ratio Particles in Rabbits

    Directory of Open Access Journals (Sweden)

    Gillian E. S. Redman

    2011-01-01

    Full Text Available Recently, inhaled pharmaceutical aerosols have seen increased investigation in the treatment of lung cancer, where the inability to deliver adequate therapeutic drug concentrations to tumour sites may be overcome with improved targeted delivery to the site of the tumour. In this study, the feasibility of magnetically targeted delivery of high aspect ratio particles loaded with iron oxide nanoparticles was studied in 19 New Zealand White rabbits. Half of the exposed rabbits had a magnetic field placed externally over their right lung. Iron sensitive magnetic resonance images of the lungs were acquired to determine the iron concentrations in the right and left lung of each animal. The right/left ratio increased in the middle and basal regions of the lung where, due to the morphology of the rabbit lung, this method of targeting is most effective. With further optimization, this technique could be an effective method for increasing the dose of drug delivered to a specific site within the lung.

  13. Surface-diffusion-driven decay of high-aspect-ratio gratings: existence of morphologically related classes.

    Science.gov (United States)

    Madrid, Marcos A; Salvarezza, Roberto C; Castez, Marcos F

    2013-06-01

    We present numerical and theoretical results concerning the technologically important process of evolution of high-aspect-ratio profiles due to surface diffusion under thermal treatment. We show how a broad class of initial gratings adopt, after a short transient stage, a typical shape that can be accurately described as a curve whose curvature has only two single Fourier modes as a function of the arc-length parameter. Moreover, we introduce a set of evolution equations for the relevant parameters that accounts very accurately for both morphological and kinetic aspects of the transformation processes for these curves in a wide region in parameter space. Regarding the decay of rectangular gratings, our numerical results show the existence of geometrically related classes that asymptotically approach to the same trajectory in parameter space. Gratings belonging to the same class pass through the same sequence of morphologies before reaching the final equilibrium state.

  14. Multiscale Domain Decomposition Methods for Elliptic Problems with High Aspect Ratios

    Institute of Scientific and Technical Information of China (English)

    Jфrg Aarnes; Thomas Y. Hou

    2002-01-01

    In this paper we study some nonoverlapping domain decomposition methods for solving a class of elliptic problems arising from composite materials and flows in porous media which contain many spatial scales. Our preconditioner differs from traditional domain decomposition preconditioners by using a coarse solver which is adaptive to small scale heterogeneous features. While the convergence rate of traditional domain decomposition algorithms using coarse solvers based on linear or polynomial interpolations may deteriorate in the presence of rapid small scale oscillations or high aspect ratios, our preconditioner is applicable to multiplescale problems without restrictive assumptions and seems to have a convergence rate nearly independent of the aspect ratio within the substructures. A rigorous convergence analysis based on the Schwarz framework is carried out, and we demonstrate the efficiency and robustness of the proposed preconditioner through numerical experiments which include problems with multiple-scale coefficients, as well problems with continuous scales.

  15. A wearable, highly stable, strain and bending sensor based on high aspect ratio graphite nanobelts

    Science.gov (United States)

    Alaferdov, A. V.; Savu, R.; Rackauskas, T. A.; Rackauskas, S.; Canesqui, M. A.; de Lara, D. S.; Setti, G. O.; Joanni, E.; de Trindade, G. M.; Lima, U. B.; de Souza, A. S.; Moshkalev, S. A.

    2016-09-01

    A simple and scalable method was developed for the fabrication of wearable strain and bending sensors, based on high aspect ratio (length/thickness ˜103) graphite nanobelt thin films deposited by a modified Langmuir-Blodgett technique onto flexible polymer substrates. The sensing mechanism is based on the changes in contact resistance between individual nanobelts upon substrate deformation. Very high sensor response stability for more than 5000 strain-release cycles and a device power consumption as low as 1 nW were achieved. The device maximum stretchability is limited by the metal electrodes and the polymer substrate; the maximum strain that could be applied to the polymer used in this work was 40%. Bending tests carried out for various radii of curvature demonstrated distinct sensor responses for positive and negative curvatures. The graphite nanobelt thin flexible films were successfully tested for acoustic vibration and heartbeat sensing.

  16. Design and Simulation of BTT Missile with High-Aspect-Ratio Wing Robust H∞ Autopilot

    Institute of Scientific and Technical Information of China (English)

    CUI Sheng-wang; LIU Li; MA Chun-yan

    2007-01-01

    For the strong coupling among the channels of bank-to-turn (BTT) missile with high-aspect-ratio wing,an autopilot is designed with a two loop control structure robust autopilot design methods.By the inner loop design,the question of pole-zero cancellation is solved,and the stabilization of structured uncertainty is achieved.Through the outer loop of H∞ controller design,the flying performance and robustness can be guaranteed.The nonlinear simulation results show that the autopilot designed has perfect time domain response,and can suppress bad influence of the inertial and kinematics couplings.It can make the missile fly stably in the large flying areas.The control is very effective.

  17. Large-area thermoelectric high-aspect-ratio nanostructures by atomic layer deposition

    Science.gov (United States)

    Ruoho, Mikko; Juntunen, Taneli; Tittonen, Ilkka

    2016-09-01

    We report on the thermoelectric properties of large-area high-aspect-ratio nanostructures. We fabricate the structures by atomic layer deposition of conformal ZnO thin films on track-etched polycarbonate substrate. The resulting structure consists of ZnO tubules which continue through the full thickness of the substrate. The electrical and thermal properties of the structures are studied both in-plane and out-of-plane. They exhibit very low out-of-plane thermal conductivity down to 0.15 W m-1 K-1 while the in-plane sheet resistance of the films was found to be half that of the same film on glass substrate, allowing material-independent doubling of output power of any planar thin-film thermoelectric generator. The wall thickness of the fabricated nanotubes was varied within a range of up to 100 nm. The samples show polycrystalline nature with (002) preferred crystal orientation.

  18. High yield polyol synthesis of round- and sharp-end silver nanowires with high aspect ratio

    Energy Technology Data Exchange (ETDEWEB)

    Nekahi, A.; Marashi, S.P.H., E-mail: pmarashi@aut.ac.ir; Fatmesari, D. Haghshenas

    2016-12-01

    Long silver nanowires (average length of 28 μm, average aspect ratio of 130) with uniform diameter along their length were produced by polyol synthesis of AgNO{sub 3} in ethylene glycol in the presence of PVP as preferential growth agent. Nanowires were produced with no addition of chloride salts such as NaCl or CuCl{sub 2} (or other additives such as Na{sub 2}S) which are usually used for lowering reduction rate of Ag ions by additional etchant of O{sub 2}/Cl{sup −}. Lower reduction rate was obtained by increasing the injection time of PVP and AgNO{sub 3} solutions, which was the significant factor in the formation of nanowires. Therefore, there was enough time for reduced Ag atoms to be deposited preferentially in the direction of PVP chains, resulting in high yield (the fraction of nanowires in the products) of nanowires (more than 95%) with high aspect ratio. The produced nanowires had both round- and sharp-ends with pentagonal cross section. Higher energy level of Ag atoms in borders of MTPs, which increases the dissolution rate of precipitated atoms, in addition to partial melting of MTPs at high synthesis temperatures, leads to the curving of the surfaces of exposed (111) crystalline planes in some MTPs and the formation of round-end silver nanowires. - Highlights: • Long silver nanowires with high aspect ratio of 130 were produced. • More than 95% nanowires were produced in products. • The produced nanowires had round- and sharp-ends with pentagonal cross section. • Additives were needed neither for high yield synthesis nor for round-end nanowires. • Melting and etching of MTPs in high energy borders resulted to round-end nanowires.

  19. Sharp-Tip Silver Nanowires Mounted on Cantilevers for High-Aspect-Ratio High-Resolution Imaging.

    Science.gov (United States)

    Ma, Xuezhi; Zhu, Yangzhi; Kim, Sanggon; Liu, Qiushi; Byrley, Peter; Wei, Yang; Zhang, Jin; Jiang, Kaili; Fan, Shoushan; Yan, Ruoxue; Liu, Ming

    2016-11-09

    Despite many efforts to fabricate high-aspect-ratio atomic force microscopy (HAR-AFM) probes for high-fidelity, high-resolution topographical imaging of three-dimensional (3D) nanostructured surfaces, current HAR probes still suffer from unsatisfactory performance, low wear-resistivity, and extravagant prices. The primary objective of this work is to demonstrate a novel design of a high-resolution (HR) HAR AFM probe, which is fabricated through a reliable, cost-efficient benchtop process to precisely implant a single ultrasharp metallic nanowire on a standard AFM cantilever probe. The force-displacement curve indicated that the HAR-HR probe is robust against buckling and bending up to 150 nN. The probes were tested on polymer trenches, showing a much better image fidelity when compared with standard silicon tips. The lateral resolution, when scanning a rough metal thin film and single-walled carbon nanotubes (SW-CNTs), was found to be better than 8 nm. Finally, stable imaging quality in tapping mode was demonstrated for at least 15 continuous scans indicating high resistance to wear. These results demonstrate a reliable benchtop fabrication technique toward metallic HAR-HR AFM probes with performance parallel or exceeding that of commercial HAR probes, yet at a fraction of their cost.

  20. A small perturbation based optimization approach for the frequency placement of high aspect ratio wings

    Science.gov (United States)

    Goltsch, Mandy

    Design denotes the transformation of an identified need to its physical embodiment in a traditionally iterative approach of trial and error. Conceptual design plays a prominent role but an almost infinite number of possible solutions at the outset of design necessitates fast evaluations. The corresponding practice of empirical equations and low fidelity analyses becomes obsolete in the light of novel concepts. Ever increasing system complexity and resource scarcity mandate new approaches to adequately capture system characteristics. Contemporary concerns in atmospheric science and homeland security created an operational need for unconventional configurations. Unmanned long endurance flight at high altitudes offers a unique showcase for the exploration of new design spaces and the incidental deficit of conceptual modeling and simulation capabilities. Structural and aerodynamic performance requirements necessitate light weight materials and high aspect ratio wings resulting in distinct structural and aeroelastic response characteristics that stand in close correlation with natural vibration modes. The present research effort evolves around the development of an efficient and accurate optimization algorithm for high aspect ratio wings subject to natural frequency constraints. Foundational corner stones are beam dimensional reduction and modal perturbation redesign. Local and global analyses inherent to the former suggest corresponding levels of local and global optimization. The present approach departs from this suggestion. It introduces local level surrogate models to capacitate a methodology that consists of multi level analyses feeding into a single level optimization. The innovative heart of the new algorithm originates in small perturbation theory. A sequence of small perturbation solutions allows the optimizer to make incremental movements within the design space. It enables a directed search that is free of costly gradients. System matrices are decomposed

  1. High aspect ratio AFM Probe processing by helium-ion-beam induced deposition.

    Science.gov (United States)

    Onishi, Keiko; Guo, Hongxuan; Nagano, Syoko; Fujita, Daisuke

    2014-11-01

    A Scanning Helium Ion Microscope (SHIM) is a high resolution surface observation instrument similar to a Scanning Electron Microscope (SEM) since both instruments employ finely focused particle beams of ions or electrons [1]. The apparent difference is that SHIMs can be used not only for a sub-nanometer scale resolution microscopic research, but also for the applications of very fine fabrication and direct lithography of surfaces at the nanoscale dimensions. On the other hand, atomic force microscope (AFM) is another type of high resolution microscopy which can measure a three-dimensional surface morphology by tracing a fine probe with a sharp tip apex on a specimen's surface.In order to measure highly uneven and concavo-convex surfaces by AFM, the probe of a high aspect ratio with a sharp tip is much more necessary than the probe of a general quadrangular pyramid shape. In this paper we report the manufacture of the probe tip of the high aspect ratio by ion-beam induced gas deposition using a nanoscale helium ion beam of SHIM.Gas of platinum organic compound was injected into the sample surface neighborhood in the vacuum chamber of SHIM. The decomposition of the gas and the precipitation of the involved metal brought up a platinum nano-object in a pillar shape on the normal commercial AFM probe tip. A SHIM system (Carl Zeiss, Orion Plus) equipped with the gas injection system (OmniProbe, OmniGIS) was used for the research. While the vacuum being kept to work, we injected platinum organic compound ((CH3)3(CH3C5H4)Pt) into the sample neighborhood and irradiated the helium ion beam with the shape of a point on the apex of the AFM probe tip. It is found that we can control the length of the Pt nano-pillar by irradiation time of the helium ion beam. The AFM probe which brought up a Pt nano-pillar is shown in Figure 1. It is revealed that a high-aspect-ratio Pt nano-pillar of ∼40nm diameter and up to ∼2000 nm length can be grown. In addition, for possible heating

  2. Gust response analysis and wind tunnel test for a high-aspect ratio wing

    Institute of Scientific and Technical Information of China (English)

    Liu Yi; Xie Changchuan; Yang Chao; Cheng Jialin

    2016-01-01

    A theoretical nonlinear aeroelastic response analysis for a flexible high-aspect ratio wing excited by harmonic gust load is presented along with a companion wind tunnel test. A multidisci-plinary coupled numerical calculation is developed to simulate the flexible model wing undergoing gust load in the time domain via discrete nonlinear finite element structural dynamic analysis and nonplanar unsteady vortex lattice aerodynamic computation. A dynamic perturbation analysis about a nonlinear static equilibrium is also used to determine the small perturbation flutter bound-ary. A novel noncontact 3-D camera measurement analysis system is firstly used in the wind tunnel test to obtain the spatial large deformation and responses. The responses of the flexible wing under different static equilibrium states and frequency gust loads are discussed. The fair to good quanti-tative agreements between the theoretical and experimental results demonstrate that the presented analysis method is an acceptable way to predict the geometrically nonlinear gust response for flex-ible wings.

  3. Plasma-assisted atomic layer deposition of conformal Pt films in high aspect ratio trenches

    Science.gov (United States)

    Erkens, I. J. M.; Verheijen, M. A.; Knoops, H. C. M.; Keuning, W.; Roozeboom, F.; Kessels, W. M. M.

    2017-02-01

    To date, conventional thermal atomic layer deposition (ALD) has been the method of choice to deposit high-quality Pt thin films grown typically from (MeCp)PtMe3 vapor and O2 gas at 300 °C. Plasma-assisted ALD of Pt using O2 plasma can offer several advantages over thermal ALD, such as faster nucleation and deposition at lower temperatures. In this work, it is demonstrated that plasma-assisted ALD at 300 °C also allows for the deposition of highly conformal Pt films in trenches with high aspect ratio ranging from 3 to 34. Scanning electron microscopy inspection revealed that the conformality of the deposited Pt films was 100% in trenches with aspect ratio (AR) up to 34. These results were corroborated by high-precision layer thickness measurements by transmission electron microscopy for trenches with an aspect ratio of 22. The role of the surface recombination of O-radicals and the contribution of thermal ALD reactions is discussed.

  4. Wet Etched High Aspect Ratio Microstructures on Quartz for MEMS Applications

    Science.gov (United States)

    Liang, Jinxing; Kohsaka, Fusao; Matsuo, Takahiro; Ueda, Toshitsugu

    Z cut α-quartz wafers were etched in saturated ammonium bifluoride solution at 87 degrees C. The side wall profiles were observed using the scanning electron microscopy (SEM) and plotted dependent on the polar direction. This research focused on investigating high aspect ratio trench and through-hole, which were dependent on the polar direction to the crystal axis. Aspect ratio in dependence on polar direction was also plotted and microchannels with aspect ratio > 3 could be achieved at the polar angle between 30° to 60°. The possibility of application for microcapillary was discussed, and the trench at 45° was considered best. Double-sided etching technique was used for manufacturing through-hole structures. Through-hole at 0° was demonstrated effective for fabrication of capacitive MEMS tilt sensor. Through-holes at 15° and 105° were proposed for fabrication of 90°-arranged two axis capactive tilt sensor, taking advantage of the twofold symmetry property around X axis and threefold symmetry property around Z axis.

  5. Dimensional measurement of micro parts with high aspect ratio in HIT-UOI

    Science.gov (United States)

    Dang, Hong; Cui, Jiwen; Feng, Kunpeng; Li, Junying; Zhao, Shiyuan; Zhang, Haoran; Tan, Jiubin

    2016-11-01

    Micro parts with high aspect ratios have been widely used in different fields including aerospace and defense industries, while the dimensional measurement of these micro parts becomes a challenge in the field of precision measurement and instrument. To deal with this contradiction, several probes for the micro parts precision measurement have been proposed by researchers in Center of Ultra-precision Optoelectronic Instrument (UOI), Harbin Institute of Technology (HIT). In this paper, optical fiber probes with structures of spherical coupling(SC) with double optical fibers, micro focal-length collimation (MFL-collimation) and fiber Bragg grating (FBG) are described in detail. After introducing the sensing principles, both advantages and disadvantages of these probes are analyzed respectively. In order to improve the performances of these probes, several approaches are proposed. A two-dimensional orthogonal path arrangement is propounded to enhance the dimensional measurement ability of MFL-collimation probes, while a high resolution and response speed interrogation method based on differential method is used to improve the accuracy and dynamic characteristics of the FBG probes. The experiments for these special structural fiber probes are given with a focus on the characteristics of these probes, and engineering applications will also be presented to prove the availability of them. In order to improve the accuracy and the instantaneity of the engineering applications, several techniques are used in probe integration. The effectiveness of these fiber probes were therefore verified through both the analysis and experiments.

  6. Tunable Ultra-high Aspect Ratio Nanorod Architectures grown on Porous Substrate via Electromigration.

    Science.gov (United States)

    Mansourian, Ali; Paknejad, Seyed Amir; Wen, Qiannan; Vizcay-Barrena, Gema; Fleck, Roland A; Zayats, Anatoly V; Mannan, Samjid H

    2016-02-29

    The interplay between porosity and electromigration can be used to manipulate atoms resulting in mass fabrication of nanoscale structures. Electromigration usually results in the accumulation of atoms accompanied by protrusions at the anode and atomic depletion causing voids at the cathode. Here we show that in porous media the pattern of atomic deposition and depletion is altered such that atomic accumulation occurs over the whole surface and not just at the anode. The effect is explained by the interaction between atomic drift due to electric current and local temperature gradients resulting from intense Joule heating at constrictions between grains. Utilizing this effect, a porous silver substrate is used to mass produce free-standing silver nanorods with very high aspect ratios of more than 200 using current densities of the order of 10(8) A/m(2). This simple method results in reproducible formation of shaped nanorods, with independent control over their density and length. Consequently, complex patterns of high quality single crystal nanorods can be formed in-situ with significant advantages over competing methods of nanorod formation for plasmonics, energy storage and sensing applications.

  7. Analysis of Interrupted Rectangular Microchannel Heat Sink with High Aspect Ratio

    Directory of Open Access Journals (Sweden)

    Harshin Kamal

    2017-01-01

    Full Text Available A computational modelling of microchannel heat sinks with high aspect ratio has been performed to compare the geometrical features in the plane parallel to the heating surface and to determine the optimum configuration for the best heat transfer characteristics. A periodic thermal development of flow can cause significant heat transfer enhancement. A consensus on a particular geometrical configuration that provides the best heat transfer characteristics has not been reached in the literature, although many novel ideas have been proposed recently. Firstly the validity and applicability of microchannel sink modelling is presented followed by an optimization of parameters of interrupted microchannel heat sink. Consequences of the multichannel effect due to the introduction of transverse microchamber are also presented. It has been shown that the average Nusselt number of the microchannel heat sink increases by the introduction of a transverse microchamber with the additional advantage of a lower pressure drop. There exists an optimum width for the transverse microchamber for which the interrupted microchannel heat sink shows optimum characteristics.

  8. Measuring ion velocity distribution functions through high-aspect ratio holes in inductively coupled plasmas

    Energy Technology Data Exchange (ETDEWEB)

    Cunge, G., E-mail: gilles.cunge@cea.fr; Darnon, M.; Dubois, J.; Bezard, P.; Mourey, O.; Petit-Etienne, C.; Vallier, L.; Despiau-Pujo, E.; Sadeghi, N. [Laboratoire des Technologies de la Microélectronique, CNRS, 17 rue des Martyrs, 38054 Grenoble (France)

    2016-02-29

    Several issues associated with plasma etching of high aspect ratio structures originate from the ions' bombardment of the sidewalls of the feature. The off normal angle incident ions are primarily due to their temperature at the sheath edge and possibly to charging effects. We have measured the ion velocity distribution function (IVDF) at the wafer surface in an industrial inductively coupled plasma reactor by using multigrid retarding field analyzers (RFA) in front of which we place 400 μm thick capillary plates with holes of 25, 50, and 100 μm diameters. The RFA then probes IVDF at the exit of the holes with Aspect Ratios (AR) of 16, 8, and 4, respectively. The results show that the ion flux dramatically drops with the increase in AR. By comparing the measured IVDF with an analytical model, we concluded that the ion temperature is 0.27 eV in our plasma conditions. The charging effects are also observed and are shown to significantly reduce the ion energy at the bottom of the feature but only with a “minor” effect on the ion flux and the shape of the IVDF.

  9. Gas-Assisted Heating Technology for High Aspect Ratio Microstructure Injection Molding

    Directory of Open Access Journals (Sweden)

    Shia-Chung Chen

    2013-01-01

    Full Text Available A hot gas is used for heating the cavity surface of a mold. Different mold gap sizes were designed. The mold surface temperature was heated to above the glass transition temperature of the plastic material, and the mold then closed for melt filling. The cavity surface can be heated to 130°C to assist the melt filling of the microfeatures. Results show that hot gas heating can improve the filling process and achieve 91% of the high aspect ratio microgrooves (about 640.38 μm of the maximum of 700 μm. The mold gap size strongly affects the heating speed and heating uniformity. Without surface preheating, the center rib is the highest. When the heating target temperature is 90°C or 100°C, the three microribs have a good uniformity of height. However, when the target temperature exceeds 100°C, the left side rib is higher than the other ribs.

  10. Bosch-like method for creating high aspect ratio poly(methyl methacrylate) (PMMA) structures

    KAUST Repository

    Haiducu, Marius

    2012-02-02

    This paper presents a method for etching millimetre-deep trenches in commercial grade PMMA using deep-UV at 254 nm. The method is based on consecutive cycles of irradiation and development of the exposed areas, respectively. The exposure segment is performed using an inexpensive, in-house built irradiation box while the development part is accomplished using an isopropyl alcohol (IPA):H2O developer. The method was tested and characterized by etching various dimension square test structures in commercial grade, mirrored acrylic. The undercut of the sidewalls due to the uncollimated nature of the irradiation light was dramatically alleviated by using a honeycomb metallic grid in between the irradiation source and the acrylic substrate and by rotating the latter using a direct current (DC) motor-driven stage. By using an extremely affordable set-up and non-toxic, environmentally friendly materials and substances, this process represents an excellent alternative to microfabricating microfluidic devices in particular and high aspect ratio structures in general using PMMA as substrate. © 2012 SPIE.

  11. Ultra-high aspect ratio copper nanowires as transparent conductive electrodes for dye sensitized solar cells

    Science.gov (United States)

    Zhu, Zhaozhao; Mankowski, Trent; Shikoh, Ali Sehpar; Touati, Farid; Benammar, Mohieddine A.; Mansuripur, Masud; Falco, Charles M.

    2016-09-01

    We report the synthesis of ultra-high aspect ratio copper nanowires (CuNW) and fabrication of CuNW-based transparent conductive electrodes (TCE) with high optical transmittance (>80%) and excellent sheet resistance (Rs zinc oxide (AZO) thin-film coatings, or platinum thin film coatings, or nickel thin-film coatings. Our hybrid transparent electrodes can replace indium tin oxide (ITO) films in dye-sensitized solar cells (DSSCs) as either anodes or cathodes. We highlight the challenges of integrating bare CuNWs into DSSCs, and demonstrate that hybridization renders the solar cell integrations feasible. The CuNW/AZO-based DSSCs have reasonably good open-circuit voltage (Voc = 720 mV) and short-circuit current-density (Jsc = 0.96 mA/cm2), which are comparable to what is obtained with an ITO-based DSSC fabricated with a similar process. Our CuNW-Ni based DSSCs exhibit a good open-circuit voltage (Voc = 782 mV) and a decent short-circuit current (Jsc = 3.96 mA/cm2), with roughly 1.5% optical-to-electrical conversion efficiency.

  12. Atomic Layer Deposition for Coating of High Aspect Ratio TiO2 Nanotube Layers

    Science.gov (United States)

    2016-01-01

    We present an optimized approach for the deposition of Al2O3 (as a model secondary material) coating into high aspect ratio (≈180) anodic TiO2 nanotube layers using the atomic layer deposition (ALD) process. In order to study the influence of the diffusion of the Al2O3 precursors on the resulting coating thickness, ALD processes with different exposure times (i.e., 0.5, 2, 5, and 10 s) of the trimethylaluminum (TMA) precursor were performed. Uniform coating of the nanotube interiors was achieved with longer exposure times (5 and 10 s), as verified by detailed scanning electron microscopy analysis. Quartz crystal microbalance measurements were used to monitor the deposition process and its particular features due to the tube diameter gradient. Finally, theoretical calculations were performed to calculate the minimum precursor exposure time to attain uniform coating. Theoretical values on the diffusion regime matched with the experimental results and helped to obtain valuable information for further optimization of ALD coating processes. The presented approach provides a straightforward solution toward the development of many novel devices, based on a high surface area interface between TiO2 nanotubes and a secondary material (such as Al2O3). PMID:27643411

  13. Large-Area High Aspect Ratio Plasmonic Interference Lithography Utilizing a Single High-k Mode.

    Science.gov (United States)

    Chen, Xi; Yang, Fan; Zhang, Cheng; Zhou, Jing; Guo, L Jay

    2016-04-26

    Plasmonic lithography, which utilizes subwavelength confinement of surface plasmon polartion (SPP) waves, has the capability of breaking the diffraction limit and delivering high resolution. However, all previously reported results suffer from critical issues, such as shallow pattern depth and pattern nonuniformity even over small exposure areas, which limit the application of the technology. In this work, periodic patterns with high aspect ratios and a half-pitch of about 1/6 of the wavelength were achieved with pattern uniformity in square centimeter areas. This was accomplished by designing a special mask and photoresist (PR) system to select a single high spatial frequency mode and incorporating the PR into a waveguide configuration to ensure uniform light exposure over the entire depth of the photoresist layer. In addition to the experimental progress toward large-scale applications of plasmonic interference lithography, the general criteria of designing such an exposure system is also discussed, which can be used for nanoscale fabrication in this fashion for various applications with different requirements for wavelength, pitch, aspect ratio, and structure.

  14. Geometrical Nonlinear Aeroelastic Stability Analysis of a Composite High-Aspect-Ratio Wing

    Directory of Open Access Journals (Sweden)

    Chang Chuan Xie

    2008-01-01

    Full Text Available A composite high-aspect-ratio wing of a high-altitude long-endurance (HALE aircraft was modeled with FEM by MSC/NASTRAN, and the nonlinear static equilibrium state is calculated under design load with follower force effect, but without load redistribution. Assuming the little vibration amplitude of the wing around the static equilibrium state, the system is linearized and the natural frequencies and mode shapes of the deformed structure are obtained. Planar doublet lattice method is used to calculate unsteady aerodynamics in frequency domain ignoring the bending effect of the deflected wing. And then, the aeroelastic stability analysis of the system under a given load condition is successively carried out. Comparing with the linear results, the nonlinear displacement of the wing tip is higher. The results indicate that the critical nonlinear flutter is of the flap/chordwise bending type because of the chordwise bending having quite a large torsion component, with low critical speed and slowly growing damping, which dose not appear in the linear analysis. Furthermore, it is shown that the variation of the nonlinear flutter speed depends on the scale of the load and on the chordwise bending frequency. The research work indicates that, for the very flexible HALE aircraft, the nonlinear aeroelastic stability is very important, and should be considered in the design progress. Using present FEM software as the structure solver (e.g. MSC/NASTRAN, and the unsteady aerodynamic code, the nonlinear aeroelastic stability margin of a complex system other than a simple beam model can be determined.

  15. High-Aspect Ratio Bio-Metallic Nanocomposites for Cellular Interactions

    Science.gov (United States)

    Deodhar, Sneha; Huckaby, Justin; Delahoussaye, Miles; DeCoster, Mark A.

    2014-08-01

    We synthesized high aspect ratio composites with biological and metal components. Scanning electron microscopy (SEM) and Transmission Electron Microscopy (TEM) revealed linear morphology and smooth surface texture. SEM, TEM and light microscopy showed that composites have scalable dimensions from nano- to micro-, with diameters as low as 60 nm, lengths exceeding 150 pm, and average aspect ratio of 100. The structures are stable, remaining intact for over one year in dried form and in liquid, and did not aggregate, in contrast to metal nanoparticles such as iron and copper. Many metal nanoparticles are toxic to cells, limiting their use for biological applications. The bio-metallic composites characterized here showed lower toxicity compared to their precursor metal nanoparticles in brain tumor cell cultures. Due to these more biocompatible properties, we tested the ability of the composites to interact with cells. Zeta potential analysis indicated that composites carry a net negative charge (-24.3 ± 2.2 mV), while the starting metal nanoparticles measured (43.3 ± 2.4 mV). We labeled the composites with poly-l-lysine fluorescein isothiocyanate (PLL-FITC), which shifted the potential to 3.5 ± 2.9 mV. It was observed by fluorescence microscopy that composites smaller than cells were internalized by some cells and larger composites remained outside. Cells became fluorescent over time due to leakage of PLL-FITC from the composites which lost fluorescence over time. Higher biocompatibility, low aggregation, and ability to control size distribution of the linear composites may make them ideal vehicles to deliver drugs or other materials to cells, and may be used as a scaffolding material for cells.

  16. GaN nanowire tip for high aspect ratio nano-scale AFM metrology (Conference Presentation)

    Science.gov (United States)

    Behzadirad, Mahmoud; Dawson, Noel; Nami, Mohsen; Rishinaramangalam, Ashwin K.; Feezell, Daniel F.; Busani, Tito L.

    2016-09-01

    In this study we introduce Gallium Nitride (GaN) nanowire (NW) as high aspect ratio tip with excellent durability for nano-scale metrology. GaN NWs have superior mechanical property and young modulus compare to commercial Si and Carbon tips which results in having less bending issue during measurement. The GaN NWs are prepared via two different methods: i) Catalyst-free selected area growth, using Metal Organic Chemical Vapor Deposition (MOCVD), ii) top-down approach by employing Au nanoparticles as the mask material in dry-etch process. To achieve small diameter tips, the semipolar planes of the NWs grown by MOCVD are etched using AZ400k. The diameter of the NWs fabricated using the top down process is controlled by using different size of nanoparticles and by Inductively Coupled Plasma etching. NWs with various diameters were manipulated on Si cantilevers using Focus Ion Beam (FIB) to make tips for AFM measurement. A Si (110) substrate containing nano-scale grooves with vertical 900 walls were used as a sample for inspection. AFM measurements were carried out in tapping modes for both types of nanowires (top-down and bottom-up grown nanowires) and results are compared with conventional Si and carbon nanotube tips. It is shown our fabricated tips are robust and have improved edge resolution over conventional Si tips. GaN tips made with NW's fabricated using our top down method are also shown to retain the gold nanoparticle at tip, which showed enhanced field effects in Raman spectroscopy.

  17. Fabrication of micro-pin array with high aspect ratio on stainless steel using nanosecond laser beam machining

    Energy Technology Data Exchange (ETDEWEB)

    Lee, Se Won [School of Mechanical and Aerospace Engineering, Seoul National University, Gwanak 599 Gwanak-ro, Gwanak-Gu, Seoul, 151-744 (Korea, Republic of); Shin, Hong Shik, E-mail: shinhs05@ut.ac.kr [Department of Energy System Engineering, Korea National University of Transportation, Chungju, Chungbuk, 380-702 (Korea, Republic of); Chu, Chong Nam [School of Mechanical and Aerospace Engineering, Seoul National University, Gwanak 599 Gwanak-ro, Gwanak-Gu, Seoul, 151-744 (Korea, Republic of)

    2013-01-01

    Highlights: Black-Right-Pointing-Pointer A high aspect ratio micro-pin array was fabricated by laser beam machining using the piling of a recast layer. Black-Right-Pointing-Pointer The recast layer could be piled due to the chromium oxide with high surface tension and viscosity of chromium oxide. Black-Right-Pointing-Pointer The machining characteristics for a high aspect ratio micro-pin array were investigated according to laser beam parameters. Black-Right-Pointing-Pointer Experiments for attaching force relative to the surface roughness of the subject plane were carried out. Black-Right-Pointing-Pointer The developed micro-pin array was successfully attached to vertical wall. - Abstract: In this paper, a micro-pin array with a high aspect ratio was fabricated on AISI 304 using laser beam ablation for attachment to a vertical wall. In recent times, there has been research in various fields, including robotics and bio-MEMS, regarding attachment to vertical walls, and micro-pin arrays may offer the best solution. For vertical wall attachment, the micro-pin should have a high aspect ratio, long length, and sharp tip. The recast layer could be piled due to the chromium oxide with high surface tension and viscosity of chromium oxide, and it composed the micro-pins with high aspect ratio. X-ray photoelectron spectroscopy (XPS) was used to identify the characteristics of the piled recast layer. The machining characteristics for a high aspect ratio micro-pin array were investigated according to laser beam machining parameters. In addition, experiments for attaching force relative to the surface roughness of the subject plane were carried out.

  18. Jet noise of high aspect-ratio rectangular nozzles with application to pneumatic high-lift devices

    Science.gov (United States)

    Munro, Scott Edward

    Circulation control wings are a type of pneumatic high-lift device that have been extensively researched as to their aerodynamic benefits. However, there has been little research into the possible airframe noise reduction benefits. The key element of noise is the jet noise associated with the jet sheet emitted from the blowing slot. This jet sheet is essentially a high aspect-ratio rectangular jet. This study directly compared far-field noise emissions from a state-of-the-art circulation control wing high lift configuration, and a conventional wing also configured for high lift. Results indicated that a circulation control wing had a significant acoustic advantage over a conventional wing for identical lift performance. A high aspect-ratio nozzle was fabricated to study the general characteristics of high aspect-ratio jets with aspect ratios from 100 to 3000. The results of this study provided the basic elements in understanding how to reduce the noise from a circulation control wing. High aspect-ratio nozzle results showed that the jet noise of this type of jet was proportional to the 8th power of the jet velocity. It was also found that the jet noise was proportional to the slot height to the 3/2 power and slot width to the 1/2 power. Fluid dynamic experiments were also performed on the high aspect-ratio nozzle. Single hot-wire experiments indicated that the jet exhaust from the high aspect-ratio nozzle was similar to a 2-d turbulent jet. Two-wire space-correlation experiments were performed to attempt to find a relationship between the slot height of the jet and the length-scale of the flow noise generating turbulence structure. The turbulent eddy convection velocity was also calculated, and was found to vary with the local centerline velocity, and also as a function of the frequency of the eddy.

  19. BisGMA/TEGDMA dental composite containing high aspect-ratio hydroxyapatite nanofibers

    Science.gov (United States)

    Chen, Liang; Yu, Qingsong; Wang, Yong; Li, Hao

    2011-01-01

    Objectives The objectives of this study are to investigate the properties of high aspect-ratio hydroxyapatite (HAP) nanofibers and the reinforcing effect of such fibers on bisphenol A glycidyl methacrylate (BisGMA)/triethylene glycol dimethacrylate (TEGDMA) dental resins (without silica microparticle filler) and dental composites (with silica microparticle filler) with various mass fractions (loading rates). Methods HAP nanofibers were synthesized using a wet-chemical method and characterized by X-ray diffraction (XRD), scanning electron microscope (SEM), and thermal gravimetric analysis (TGA). Biaxial flexural strength (BFS) of the HAP nanofibers reinforced dental resins without any microsized filler and dental composites with silica microparticle filler was tested and analysis of variance (ANOVA) was used for the statistically analysis of acquired data. The morphology of fracture surface of tested dental composite samples was examined by SEM. Results The HAP nanofibers with aspect-ratios of 600 to 800 can be successfully fabricated with a simple wet-chemical method in aqueous solution. Impregnation of small mass fractions of the HAP nanofibers (5 wt% or 10 wt%) into the BisGMA/TEGDMA dental resins or impregnation of small mass fractions of the HAP nanofibers (2 wt% or 3 wt%) into the dental composites can substantially improve the biaxial flexural strength of the resulting dental resins and composites. A percolation threshold of HAP nanofibers, beyond which more nanofibers will no longer further increase the mechanical properties of dental composites containing HAP nanofibers, was observed for the dental composites with or without silica microparticle filler. Our mechanical testing and fractographic analysis indicated that the relatively good dispersion of HAP nanofibers at low mass fraction is the key reason for the significantly improved biaxial flexural strength, while higher mass fraction of HAP nanofibers tends to lead to bundles that cannot effectively

  20. Fabrication of Ni stamp with high aspect ratio, two-leveled, cylindrical microstructures using dry etching and electroplating

    DEFF Research Database (Denmark)

    Petersen, Ritika Singh; Keller, Stephan Sylvest; Hansen, Ole;

    2015-01-01

    We describe a process for the fabrication of a Ni stamp that is applied to the microstructuring of polymers by hot embossing. The target devices are microcontainers that have a potential application in oral drug delivery. Each container is a 3D, cylindrical, high aspect ratio microstructure...

  1. The field emission properties of high aspect ratio diamond nanocone arrays fabricated by focused ion beam milling

    Directory of Open Access Journals (Sweden)

    Z.L. Wang, Q. Wang, H.J. Li, J.J. Li, P. Xu, Q. Luo, A.Z. Jin, H.F. Yang and C.Z. Gu

    2005-01-01

    Full Text Available High aspect ratio diamond nanocone arrays are formed on freestanding diamond film by means of focused ion beam (FIB milling technology and hot-filament chemical vapor deposition (HFCVD method. The structure and phase purity of an individual diamond nanocone are characterized by scanning electron microscopy (SEM and micro-Raman spectroscopy. The result indicates that the diamond cones with high aspect ratio and small tip apex radius can be obtained by optimizing the parameters of FIB milling and diamond growth. The diamond nanocone arrays were also used to study the electron field emission properties and electric field shielding effect, finding high emission current density, low threshold and weak shielding effect, all attributable to the high field enhancement factor and suitable cone density of the diamond nanocone emitter

  2. High aspect ratio microstructuring of transparent dielectrics using femtosecond laser pulses: method for optimization of the machining throughput

    Science.gov (United States)

    Hendricks, F.; der Au, J. Aus; Matylitsky, V. V.

    2014-10-01

    High average power, high repetition rate femtosecond lasers with μJ pulse energies are increasingly used for material processing applications. The unique advantage of material processing with sub-picosecond lasers is efficient, fast and localized energy deposition, which leads to high ablation efficiency and accuracy in nearly all kinds of solid materials. This work focuses on the machining of high aspect ratio structures in transparent dielectrics, in particular chemically strengthened Xensation™ glass from Schott using multi-pass ablative material removal. For machining of high aspect ratio structures, among others needed for cutting applications, a novel method to determine the best relation between kerf width and number of overscans is presented. The importance of this relation for optimization of the machining throughput will be demonstrated.

  3. Framework to model neutral particle flux in convex high aspect ratio structures using one-dimensional radiosity

    Science.gov (United States)

    Manstetten, Paul; Filipovic, Lado; Hössinger, Andreas; Weinbub, Josef; Selberherr, Siegfried

    2017-02-01

    We present a computationally efficient framework to compute the neutral flux in high aspect ratio structures during three-dimensional plasma etching simulations. The framework is based on a one-dimensional radiosity approach and is applicable to simulations of convex rotationally symmetric holes and convex symmetric trenches with a constant cross-section. The framework is intended to replace the full three-dimensional simulation step required to calculate the neutral flux during plasma etching simulations. Especially for high aspect ratio structures, the computational effort, required to perform the full three-dimensional simulation of the neutral flux at the desired spatial resolution, conflicts with practical simulation time constraints. Our results are in agreement with those obtained by three-dimensional Monte Carlo based ray tracing simulations for various aspect ratios and convex geometries. With this framework we present a comprehensive analysis of the influence of the geometrical properties of high aspect ratio structures as well as of the particle sticking probability on the neutral particle flux.

  4. High aspect ratio tungsten grating on ultrathin Si membranes for extreme UV lithography

    Science.gov (United States)

    Peng, Xinsheng; Ying, Yulong

    2016-09-01

    Extreme ultraviolet lithography is one of the modern lithography tools for high-volume manufacturing with 22 nm resolution and beyond. But critical challenges exist to the design and fabrication of large-scale and highly efficient diffraction transmission gratings, significantly reducing the feature sizes down to 22 nm and beyond. To achieve such a grating, the surface flatness, the line edge roughness, the transmission efficiency and aspect ratio should be improved significantly. Delachat et al (2015 Nanotechnology 26 108262) develop a full process to fabricate a tungsten diffraction grating on an ultrathin silicon membrane with higher aspect ratio up to 8.75 that met all the aforementioned requirements for extreme ultraviolet lithography. This process is fully compatible with standard industrial extreme ultraviolet lithography.

  5. High aspect ratio tungsten grating on ultrathin Si membranes for extreme UV lithography.

    Science.gov (United States)

    Peng, Xinsheng; Ying, Yulong

    2016-09-02

    Extreme ultraviolet lithography is one of the modern lithography tools for high-volume manufacturing with 22 nm resolution and beyond. But critical challenges exist to the design and fabrication of large-scale and highly efficient diffraction transmission gratings, significantly reducing the feature sizes down to 22 nm and beyond. To achieve such a grating, the surface flatness, the line edge roughness, the transmission efficiency and aspect ratio should be improved significantly. Delachat et al (2015 Nanotechnology 26 108262) develop a full process to fabricate a tungsten diffraction grating on an ultrathin silicon membrane with higher aspect ratio up to 8.75 that met all the aforementioned requirements for extreme ultraviolet lithography. This process is fully compatible with standard industrial extreme ultraviolet lithography.

  6. Deep proton writing of high aspect ratio SU-8 micro-pillars on glass

    Science.gov (United States)

    Ebraert, Evert; Rwamucyo, Ben; Thienpont, Hugo; Van Erps, Jürgen

    2016-12-01

    Deep proton writing (DPW) is a fabrication technology developed for the rapid prototyping of polymer micro-structures. We use SU-8, a negative resist, spincoated in a layer up to 720 μm-thick in a single step on borosilicate glass, for irradiation with a collimated 12 MeV energy proton beam. Micro-pillars with a slightly conical profile are irradiated in the SU-8 layer. We determine the optimal proton fluence to be 1.02 × 104 μm-2, with which we are able to repeatably achieve micro-pillars with a top-diameter of 138 ± 1 μm and a bottom-diameter of 151 ± 3 μm. The smallest fabricated pillars have a top-diameter of 57 ± 5 μm. We achieved a root-mean-square sidewall surface roughness between 19 nm and 35 nm for the fabricated micro-pillars, measured over an area of 5 × 63.7 μm. We briefly discuss initial testing of two potential applications of the fabricated micro-pillars. Using ∼100 μm-diameter pillars as waveguides for gigascale integration optical interconnect applications, has shown a 4.7 dB improvement in optical multimode fiber-to-fiber coupling as compared to the case where an air-gap is present between the fibers at the telecom wavelength of 1550 nm. The ∼140 μm-diameter pillars were used for mold fabrication with silicone casting. The resulting mold can be used for hydrogel casting, to obtain hydrogel replicas mimicking human tissue for in vitro bio-chemical applications.

  7. Deep proton writing of high aspect ratio SU-8 micro-pillars on glass

    Energy Technology Data Exchange (ETDEWEB)

    Ebraert, Evert, E-mail: eebraert@b-phot.org; Rwamucyo, Ben; Thienpont, Hugo; Van Erps, Jürgen

    2016-12-15

    Deep proton writing (DPW) is a fabrication technology developed for the rapid prototyping of polymer micro-structures. We use SU-8, a negative resist, spincoated in a layer up to 720 μm-thick in a single step on borosilicate glass, for irradiation with a collimated 12 MeV energy proton beam. Micro-pillars with a slightly conical profile are irradiated in the SU-8 layer. We determine the optimal proton fluence to be 1.02 × 10{sup 4} μm{sup −2}, with which we are able to repeatably achieve micro-pillars with a top-diameter of 138 ± 1 μm and a bottom-diameter of 151 ± 3 μm. The smallest fabricated pillars have a top-diameter of 57 ± 5 μm. We achieved a root-mean-square sidewall surface roughness between 19 nm and 35 nm for the fabricated micro-pillars, measured over an area of 5 × 63.7 μm. We briefly discuss initial testing of two potential applications of the fabricated micro-pillars. Using ∼100 μm-diameter pillars as waveguides for gigascale integration optical interconnect applications, has shown a 4.7 dB improvement in optical multimode fiber-to-fiber coupling as compared to the case where an air–gap is present between the fibers at the telecom wavelength of 1550 nm. The ∼140 μm-diameter pillars were used for mold fabrication with silicone casting. The resulting mold can be used for hydrogel casting, to obtain hydrogel replicas mimicking human tissue for in vitro bio-chemical applications.

  8. Deposition of a-C:H films on inner surface of high-aspect-ratio microchannel

    Science.gov (United States)

    Hirata, Yuki; Choi, Junho

    2016-08-01

    Hydrogenated amorphous carbon (a-C:H) films were prepared on inner surface of 100-μm-width microchannel by using a bipolar-type plasma based ion implantation and deposition. The microchannel was fabricated using a silicon plate, and two kinds of microchannels were prepared, namely, with a bottom layer (open at one end) and without a bottom layer (open at both ends). The distribution of thickness and hardness of films was evaluated by SEM and nanoindentation measurements, respectively, and the microstructures of films were evaluated by Raman spectroscopy. Furthermore, the behavior of ions and radicals was analyzed simultaneously by combining the calculation methods of Particle-In-Cell/Monte Carlo Collision and Direct Simulation Monte Carlo to investigate the coating mechanism for the microchannel. It was found that the film thickness decreased as the depth of the coating position increased in the microchannels where it is open at one end. The uniformity of the film thickness improved by increasing the negative pulse voltage because ions can arrive at the deeper part of the microchannel. In addition, the hardness increased as the depth of the coating position increased. This is because the radicals do not arrive at the deeper part of the microchannel, and the incident proportion of ions relative to that of radicals increases, resulting in a high hardness due to the amorphization of the film. The opening area of the microchannel where the aspect ratio is very small, radicals dominate the incident flux, whereas ions prevail over radicals above an aspect ratio of about 7.5. On the other hand, in the microchannels that are open at both ends, there were great improvements in uniformity of the film thickness, hardness, and the film structure. The a-C:H films were successfully deposited on the entire inner surface of a microchannel with an aspect ratio of 20.

  9. Subsonic and transonic pressure measurements on a high-aspect-ratio supercritical-wing model with oscillating control surfaces

    Science.gov (United States)

    Sandford, M. C.; Ricketts, R. H.; Watson, J. J.

    1981-01-01

    A high aspect ratio supercritical wing with oscillating control surfaces is described. The semispan wing model was instrumented with 252 static orifices and 164 in situ dynamic pressure gases for studying the effects of control surface position and sinusoidal motion on steady and unsteady pressures. Data from the present test (this is the second in a series of tests on this model) were obtained in the Langley Transonic Dynamics Tunnel at Mach numbers of 0.60 and 0.78 and are presented in tabular form.

  10. Designs and processes toward high-aspect-ratio nanostructures at the deep nanoscale: unconventional nanolithography and its applications

    Science.gov (United States)

    Lee, Sori; Park, Byeonghak; Kim, Jun Sik; Kim, Tae-il

    2016-11-01

    The patterning of high-resolution-featured deep-nanoscale structures with a high aspect ratio (AR) has received increasing attention in recent years as a promising technique for a wide range of applications, including electrical, optical, mechanical and biological systems. Despite extensive efforts to develop viable nanostructure fabrication processes, a superior technique enabling defect-free, high-resolution control over a large area is still required. In this review, we focus on recent important advances in the designs and processes of high-resolution nanostructures possessing a high AR, including hierarchical and 3D patterns. The unique applications of these materials are also discussed.

  11. Shrink film patterning by craft cutter: complete plastic chips with high resolution/high-aspect ratio channel.

    Science.gov (United States)

    Taylor, Douglas; Dyer, David; Lew, Valerie; Khine, Michelle

    2010-09-21

    This paper presents a rapid, ultra-low-cost approach to fabricate microfluidic devices using a polyolefin shrink film and a digital craft cutter. The shrinking process (with a 95% reduction in area) results in relatively uniform and consistent microfluidic channels with smooth surfaces, vertical sidewalls, and high aspect ratio channels with lateral resolutions well beyond the tool used to cut them. The thermal bonding of the layers results in strongly bonded devices. Complex microfluidic designs are easily designed on the fly and protein assays are also readily integrated into the device. Full device characterization including channel consistency, optical properties, and bonding strength are assessed in this technical note.

  12. Real time ablation rate measurement during high aspect-ratio hole drilling with a 120-ps fiber laser.

    Science.gov (United States)

    Mezzapesa, Francesco P; Sibillano, Teresa; Di Niso, Francesca; Ancona, Antonio; Lugarà, Pietro M; Dabbicco, Maurizio; Scamarcio, Gaetano

    2012-01-02

    We report on the instantaneous detection of the ablation rate as a function of depth during ultrafast microdrilling of metal targets. The displacement of the ablation front has been measured with a sub-wavelength resolution using an all-optical sensor based on the laser diode self-mixing interferometry. The time dependence of the laser ablation process within the depth of aluminum and stainless steel targets has been investigated to study the evolution of the material removal rate in high aspect-ratio micromachined holes.

  13. Fabrication of high-aspect-ratio polymer microstructures and hierarchical textures using carbon nanotube composite master molds.

    Science.gov (United States)

    Copic, Davor; Park, Sei Jin; Tawfick, Sameh; De Volder, Michael F L; Hart, A John

    2011-05-21

    Scalable and cost effective patterning of polymer structures and their surface textures is essential to engineer material properties such as liquid wetting and dry adhesion, and to design artificial biological interfaces. Further, fabrication of high-aspect-ratio microstructures often requires controlled deep-etching methods or high-intensity exposure. We demonstrate that carbon nanotube (CNT) composites can be used as master molds for fabrication of high-aspect-ratio polymer microstructures having anisotropic nanoscale textures. The master molds are made by growth of vertically aligned CNT patterns, capillary densification of the CNTs using organic solvents, and capillary-driven infiltration of the CNT structures with SU-8. The composite master structures are then replicated in SU-8 using standard PDMS transfer molding methods. By this process, we fabricated a library of replicas including vertical micro-pillars, honeycomb lattices with sub-micron wall thickness and aspect ratios exceeding 50:1, and microwells with sloped sidewalls. This process enables batch manufacturing of polymer features that capture complex nanoscale shapes and textures, while requiring only optical lithography and conventional thermal processing.

  14. Nanoimprinting ultrasmall and high-aspect-ratio structures by using rubber-toughened UV cured epoxy resist

    Science.gov (United States)

    Shin, Young Jae; Wu, Yi-Kuei; Guo, L. Jay

    2013-06-01

    A simple and robust scheme is proposed for the fabrication of nanoscale (20 nm line width) and high-aspect-ratio (9:1) structures by using modulus-tunable UV curable epoxy resists. Additionally, the ability to control the Young’s modulus of the imprinted material from hard to rigiflex using these epoxy resists is demonstrated. The physical properties of the new epoxy resists were controlled by adjusting the ratio of bisphenol F-type epoxy resin and acrylonitrile-butadiene rubber-based epoxy resin in the formulation of the resist. The mechanical properties of the resist were tuned to obtain various aspect ratios as well as mold flexibility for conformal contact over non-planar surfaces and large areas. In order to reduce the line width of the imprinted patterns, a process to conformally coat the mold structure by atomic layer deposition of alumina was also developed. Narrow lines with high-aspect-ratio features and with very low defect density were achieved via the new approach and the high mechanical strength of the new resist formulation.

  15. The Space-Time CESE Method Applied to Viscous Flow Computations with High-Aspect Ratio Triangular or Tetrahedral Meshes

    Science.gov (United States)

    Chang, Chau-Lyan; Venkatachari, Balaji

    2016-11-01

    Flow physics near the viscous wall is intrinsically anisotropic in nature, namely, the gradient along the wall normal direction is much larger than that along the other two orthogonal directions parallel to the surface. Accordingly, high aspect ratio meshes are employed near the viscous wall to capture the physics and maintain low grid count. While such arrangement works fine for structured-grid based methods with dimensional splitting that handles derivatives in each direction separately, similar treatments often lead to numerical instability for unstructured-mesh based methods when triangular or tetrahedral meshes are used. The non-splitting treatment of near-wall gradients for high-aspect ratio triangular or tetrahedral elements results in an ill-conditioned linear system of equations that is closely related to the numerical instability. Altering the side lengths of the near wall tetrahedrons in the gradient calculations would make the system less unstable but more dissipative. This research presents recent progress in applying numerical dissipation control in the space-time conservation element solution element (CESE) method to reduce or alleviate the above-mentioned instability while maintaining reasonable solution accuracy.

  16. Single-pulse femtosecond laser Bessel beams drilling of high-aspect-ratio microholes based on electron dynamics control

    Science.gov (United States)

    Zhao, Weiwei; Li, Xiaowei; Xia, Bo; Yan, Xueliang; Han, Weina; Lu, Yongfeng; Jiang, Lan

    2014-11-01

    Microholes drilling has attracted extensive research efforts for its broad applications in photonics, microfluidics, optical fibers and many other fields. A femtosecond (fs) laser is a promising tool for high-precision materials processing with reduced recast/microcracks and minimized heat affected zones. But there remain many challenges in hole drilling using conventional fs laser with Gaussian beams, such as low aspect ratio and taper effects. We report small-diameter and high-aspect-ratio microholes with taper free drilling in PMMA (polymethyl methacrylate) using single-pulse fs laser Bessel beams. Axicon is used to transform Gaussian beams into Bessel beams, which then irradiate in the sample by a telescope consisting of plano-convex lens and microscope objective. Using this technique, we enhance the aspect ratio of microholes by 55 times as compared with Gaussian beams. We attribute this high aspect ratio and high quality microholes formation to the unique spatial intensity distribution and propagation stability of Bessel beams, which can effectively adjust the transient localized electron density distribution leading to a long and uniform localized-interacted zone. By using the optimized pulse energy and focal depth position, the microholes diameter ranges between 1.4-2.1 μm and the aspect ratio can exceed 460. This efficient technique is of great potentials for fabrication of microphotonics devices and microfluidics.

  17. Tailoring the Mechanical Properties of High-Aspect-Ratio Carbon Nanotube Arrays using Amorphous Silicon Carbide Coatings

    NARCIS (Netherlands)

    Poelma, R.H.; Morana, B.; Vollebregt, S.; Schlangen, H.E.J.G.; Van Zeijl, H.W.; Fan, X.; Zhang, G.Q.

    2014-01-01

    The porous nature of carbon nanotube (CNT) arrays allows for the unique opportunity to tailor their mechanical response by the infiltration and deposition of nanoscale conformal coatings. Here, we fabricate novel photo-lithographically defined CNT pillars that are conformally coated with amorphous s

  18. Tailoring the Mechanical Properties of High-Aspect-Ratio Carbon Nanotube Arrays using Amorphous Silicon Carbide Coatings

    NARCIS (Netherlands)

    Poelma, R.H.; Morana, B.; Vollebregt, S.; Schlangen, H.E.J.G.; Van Zeijl, H.W.; Fan, X.; Zhang, G.Q.

    2014-01-01

    The porous nature of carbon nanotube (CNT) arrays allows for the unique opportunity to tailor their mechanical response by the infiltration and deposition of nanoscale conformal coatings. Here, we fabricate novel photo-lithographically defined CNT pillars that are conformally coated with amorphous

  19. High fidelity replication of surface texture and geometric form of a high aspect ratio aerodynamic test component

    Science.gov (United States)

    Walton, Karl; Fleming, Leigh; Goodhand, Martin; Racasan, Radu; Zeng, Wenhan

    2016-06-01

    This paper details, assesses and validates a technique for the replication of a titanium wind tunnel test aerofoil in polyurethane resin. Existing resin replication techniques are adapted to overcome the technical difficulties associated with casting a high aspect ratio component. The technique is shown to have high replication fidelity over all important length-scales. The blade chord was accurate to 0.02%, and the maximum blade thickness was accurate to 2.5%. Important spatial and amplitude areal surface texture parameter were accurate to within 2%. Compared to an existing similar system using correlation areal parameters the current technique is shown to have lower fidelity and this difference is discussed. The current technique was developed for the measurement of boundary layer flow ‘laminar to turbulent’ transition for gas turbine compressor blade profiles and this application is illustrated.

  20. Single phase flow characteristics of FC-72 and ethanol in high aspect ratio rectangular mini- and micro-channels

    Science.gov (United States)

    Wang, Yuan; Wang, Zhen-guo

    2016-11-01

    Single phase flow friction factor of FC-72 and ethanol in mini-and micro-channels are experimentally investigated in the present study. High aspect ratio3 rectangular channels are selected, the hydraulic diameters of which are 571 µm, 762 µm and 1454 µm, and the aspect ratios are 20, 20 and 10 respectively. Degassed ethanol and FC-72 are used as working fluids. All the friction factors acquired in the 571 µm and 762 µm channels agree with the conventional friction theory within  ±20%-±25%. In the 1454 µm channel, however, deviations from the conventional theory occur and a modified empirical correlation of friction factor as a function of Reynolds number is proposed. Early transition from laminar to transitional flow is captured. Besides, effects of liquid physical properties are discussed. Lower viscosity and higher liquid density are responsible for the higher friction factor of FC-72. The influence of liquid properties weakens as the Reynolds number increases.

  1. Hydrothermal Synthesis of ZnO Structures Formed by High-Aspect-Ratio Nanowires for Acetone Detection.

    Science.gov (United States)

    Cao, Zhen; Wang, Yong; Li, Zhanguo; Yu, Naisen

    2016-12-01

    Snowflake-like ZnO structures originating from self-assembled nanowires were prepared by a low-temperature aqueous solution method. The as-grown hierarchical ZnO structures were investigated by X-ray diffraction (XRD) and field-emission scanning electron microscopy (FESEM). The results showed that the snowflake-like ZnO structures were composed of high-aspect-ratio nanowires. Furthermore, gas-sensing properties to various testing gases of 10 and 50 ppm were measured, which confirms that the ZnO structures were of good selectivity and response to acetone and could serve for acetone sensor to detect low-concentration acetone.

  2. Electrolytic Manganese Dioxide Coatings on High Aspect Ratio Micro-Pillar Arrays for 3D Thin Film Lithium Ion Batteries

    Directory of Open Access Journals (Sweden)

    Yafa Zargouni

    2017-05-01

    Full Text Available In this work, we present the electrochemical deposition of manganese dioxide (MnO2 thin films on carbon-coated TiN/Si micro-pillars. The carbon buffer layer, grown by plasma enhanced chemical vapor deposition (PECVD, is used as a protective coating for the underlying TiN current collector from oxidation, during the film deposition, while improving the electrical conductivity of the stack. A conformal electrolytic MnO2 (EMD coating is successfully achieved on high aspect ratio C/TiN/Si pillar arrays by tailoring the deposition process. Lithiation/Delithiation cycling tests have been performed. Reversible insertion and extraction of Li+ through EMD structure are observed. The fabricated stack is thus considered as a good candidate not only for 3D micorbatteries but also for other energy storage applications.

  3. The fluid mechanics of a high aspect ratio slot with an impressed pressure gradient and secondary injection

    Science.gov (United States)

    Sobanik, John Bertram

    1993-01-01

    A high aspect ratio slot flow (which emulates the gas leakage path in a gas turbine engine outer turbine air seal) is studied by use of a high aspect ratio slot using water as the working fluid. The cross section of the geometry is similar to a 'T', the slot being the vertical stroke and the main flow being the cross bar. A pressure gradient in the axial direction is created by blocking the main flow at a discreet location with an orifice plate (or blade tip simulator), located above the slot. Seven individually metered secondary flow injectors are located periodically along the bottom of the wall of the slot. Two slot widths, 1/8 and 1/4 inch, were investigated for length to width aspect ratios of 384 and 192 and height to width aspect ratios 33.2 and 16.6 respectively. Orifice plate pressure drops sufficient to give Reynolds numbers based upon half width of the slot, without secondary injection turned on, of 2350 and 4700 in the 1/8 inch slot and 4700 and 9400 in the 1/4 inch slot were run. Various secondary injection scenarios were added to the flow, the cases most studied being the no-injection and the all injectors flowing equal mass rates. Total injection rates for all seven injectors of 3.78 and 7.56 slot volumes per second were run. Laser velocimetry data and flow visualization pictures using fluorescein dye in the secondary flow are compared with computational results form the TEACH 3-D computer code. Major features and trends of the flow are captured by the computational model. Recommendations for further improvement of the numerical accuracy involves modification of the TEACH 3-D code to allow the 'slip condition' on all confining boundaries of the flow, or using a code which permits the 'slip condition' on all boundaries as a built-in option.

  4. Ultra-high aspect ratio Si nanowires fabricated with plasma etching: plasma processing, mechanical stability analysis against adhesion and capillary forces and oleophobicity.

    Science.gov (United States)

    Zeniou, A; Ellinas, K; Olziersky, A; Gogolides, E

    2014-01-24

    Room-temperature deep Si etching using time-multiplexed deep reactive ion etching (DRIE) processes is investigated to fabricate ultra-high aspect ratio Si nanowires (SiNWs) perpendicular to the silicon substrate. Nanopatterning is achieved using either top-down techniques (e.g. electron beam lithography) or colloidal polystyrene (PS) sphere self-assembly. The latter is a faster and more economical method if imperfections in diameter and position can be tolerated. We demonstrate wire radii from below 100 nm to several micrometers, and aspect ratios (ARs) above 100:1 with etching rates above 1 μm min(-1) using classical mass flow controllers with pulsing rise times of seconds. The mechanical stability of these nanowires is studied theoretically and experimentally against adhesion and capillary forces. It is shown that above ARs of the order of 50:1 for spacing 1 μm, SiNWs tend to bend due to adhesion forces between them. Such large adhesion forces are due to the high surface energy of silicon. Wetting the SiNWs with water and drying also gives rise to capillary forces. We find that capillary forces may be less important for SiNW collapse/bending compared to adhesion forces of dry SiNWs, contrary to what is observed for polymeric nanowires/nanopillars which have a much lower surface energy compared to silicon. Finally we show that SiNW arrays have oleophobic and superoleophobic properties, i.e. they exhibit excellent anti-wetting properties for a wide range of liquids and oils due to the re-entrant profile produced by the DRIE process and the well-designed spacing.

  5. Ultra-high aspect ratio Si nanowires fabricated with plasma etching: plasma processing, mechanical stability analysis against adhesion and capillary forces and oleophobicity

    Science.gov (United States)

    Zeniou, A.; Ellinas, K.; Olziersky, A.; Gogolides, E.

    2014-01-01

    Room-temperature deep Si etching using time-multiplexed deep reactive ion etching (DRIE) processes is investigated to fabricate ultra-high aspect ratio Si nanowires (SiNWs) perpendicular to the silicon substrate. Nanopatterning is achieved using either top-down techniques (e.g. electron beam lithography) or colloidal polystyrene (PS) sphere self-assembly. The latter is a faster and more economical method if imperfections in diameter and position can be tolerated. We demonstrate wire radii from below 100 nm to several micrometers, and aspect ratios (ARs) above 100:1 with etching rates above 1 μm min-1 using classical mass flow controllers with pulsing rise times of seconds. The mechanical stability of these nanowires is studied theoretically and experimentally against adhesion and capillary forces. It is shown that above ARs of the order of 50:1 for spacing 1 μm, SiNWs tend to bend due to adhesion forces between them. Such large adhesion forces are due to the high surface energy of silicon. Wetting the SiNWs with water and drying also gives rise to capillary forces. We find that capillary forces may be less important for SiNW collapse/bending compared to adhesion forces of dry SiNWs, contrary to what is observed for polymeric nanowires/nanopillars which have a much lower surface energy compared to silicon. Finally we show that SiNW arrays have oleophobic and superoleophobic properties, i.e. they exhibit excellent anti-wetting properties for a wide range of liquids and oils due to the re-entrant profile produced by the DRIE process and the well-designed spacing.

  6. Fabrication of high aspect ratio TiO2 and Al2O3 nanogratings by atomic layer deposition

    DEFF Research Database (Denmark)

    Shkondin, Evgeniy; Takayama, Osamu; Michael-Lindhard, Jonas

    2016-01-01

    followed by ALD of TiO2 or Al2O3. Then, the template was etched away using SF6 in an inductively coupled plasma tool, which resulted in the formation of isolated ALD coatings, thereby achieving high aspect ratio grating structures. SF6 plasma removes silicon selectively without any observable influence......The authors report on the fabrication of TiO2 and Al2O3 nanostructured gratings with an aspect ratio of up to 50. The gratings were made by a combination of atomic layer deposition (ALD) and dry etch techniques. The workflow included fabrication of a Si template using deep reactive ion etching...... in a gradual change in the pitch value of the structures. The pitch on top of the gratings is 400 nm, and it gradually reduces to 200 nm at the bottom. The form of the bending can be reshaped by Arþ ion beam etching. The chemical purity of the ALD grown materials was analyzed by x-ray photoelectron...

  7. High Aspect Ratio Silver Conductive Tracks in Inkjet Printing%喷墨打印制备高“高宽比”银导线工艺

    Institute of Scientific and Technical Information of China (English)

    张磊; 朱云龙; 程晓鼎; 王驰远

    2016-01-01

    传统丝网印刷技术因其接触式印刷工艺难以提高金属导线的精度和“高宽比”,为实现高“高宽比”的金属导线制造,以低黏度纳米银墨水为喷墨材料,采用自主研发的喷墨打印设备在多种基材表面打印银导线.通过喷墨打印实验方法研究了喷墨打印过程的“咖啡环”及“马鞍型”缺陷产生原理及影响因素,通过在Teslin、Kapton、多晶硅硅片及高光相纸4种基材上多层打印及改变基板温度制备银导线,研究了银导线“高宽比”及三维形貌的变化关系.实验结果表明:基板温度在60℃时,打印的银导线呈“拱型”;基板温度在80℃时,打印的银导线“高宽比”最佳且受基材影响减弱.打印层数为20层时,导线边缘出现波浪纹;打印层数为80层时,波浪纹消失,导线形貌均匀.烧结温度为200℃时,银导线导电能力得到极大提升,Teslin基材形成的银导线电阻率最低至2.13μΩ·cm.%It' s difficult to improve the accuracy and aspect ratio of conductive tracks for the traditional screen printing technology. In order to achieve high aspect ratio of conductive tracks, an ink jet printing method for fabrication of high aspect ratio silver tracks was described. The mechanisms and influence factors of coffee-ring and M-type effect were revealed by experiments. The experiments of multi-pass inkjet printing on Teslin, Kapton, Polycrystalline silicon, glossy photo paper and altering substrates temperature procedure were carried out. The results show that when the substrate temperature is 60℃, the arch-type silver tracks are formed. When the substrate temperature is 80 ℃, the optimized aspect ratio of silver tracks is formed and the influence by different substrates is weak. As inkjet printing runs 20 pass, wave form on the edge of silver tracks comes out. When inkjet printing runs 80 pass, wave form fades away and high aspect ratio silver tracks are fabricated instead. When

  8. Ionic transport through sub-10 nm diameter hydrophobic high-aspect ratio nanopores: experiment, theory and simulation

    Science.gov (United States)

    Balme, Sébastien; Picaud, Fabien; Manghi, Manoel; Palmeri, John; Bechelany, Mikhael; Cabello-Aguilar, Simon; Abou-Chaaya, Adib; Miele, Philippe; Balanzat, Emmanuel; Janot, Jean Marc

    2015-01-01

    Fundamental understanding of ionic transport at the nanoscale is essential for developing biosensors based on nanopore technology and new generation high-performance nanofiltration membranes for separation and purification applications. We study here ionic transport through single putatively neutral hydrophobic nanopores with high aspect ratio (of length L = 6 μm with diameters ranging from 1 to 10 nm) and with a well controlled cylindrical geometry. We develop a detailed hybrid mesoscopic theoretical approach for the electrolyte conductivity inside nanopores, which considers explicitly ion advection by electro-osmotic flow and possible flow slip at the pore surface. By fitting the experimental conductance data we show that for nanopore diameters greater than 4 nm a constant weak surface charge density of about 10−2 C m−2 needs to be incorporated in the model to account for conductance plateaus of a few pico-siemens at low salt concentrations. For tighter nanopores, our analysis leads to a higher surface charge density, which can be attributed to a modification of ion solvation structure close to the pore surface, as observed in the molecular dynamics simulations we performed. PMID:26036687

  9. Direct investigation of the ablation rate evolution during laser drilling of high-aspect-ratio micro-holes

    Science.gov (United States)

    Mezzapesa, Francesco P.; Sibillano, Teresa; Columbo, Lorenzo L.; Di Niso, Francesca; Ancona, Antonio; Dabbicco, Maurizio; De Lucia, Francesco; Lugarà, Pietro M.; Scamarcio, Gaetano

    2012-03-01

    The recent development of ultrafast laser ablation technology in precision micromachining has dramatically increased the demand for reliable and real-time detection systems to characterize the material removal process. In particular, the laser percussion drilling of metals is lacking of non-invasive techniques able to monitor into the depth the spatial- and time-dependent evolution all through the ablation process. To understand the physical interaction between bulk material and high-energy light beam, accurate in-situ measurements of process parameters such as the penetration depth and the removal rate are crucial. We report on direct real time measurements of the ablation front displacement and the removal rate during ultrafast laser percussion drilling of metals by implementing a contactless sensing technique based on optical feedback interferometry. High aspect ratio micro-holes were drilled onto steel plates with different thermal properties (AISI 1095 and AISI 301) and Aluminum samples using 120-ps/110-kHz pulses delivered by a microchip laser fiber amplifier. Percussion drilling experiments have been performed by coaxially aligning the diode laser probe beam with the ablating laser. The displacement of the penetration front was instantaneously measured during the process with a resolution of 0.41 μm by analyzing the sawtooth-like induced modulation of the interferometric signal out of the detector system.

  10. Ultra-high aspect ratio poly-Si FinFET using an improved spacer formation technique

    Science.gov (United States)

    Liu, Libin; Liang, Renrong; Wang, Jing; Xu, Jun

    2017-04-01

    An improved spacer formation technique was proposed and developed to fabricate poly-Si fin field-effect transistors (FinFETs) with an ultra-high aspect ratio. The as-demonstrated FinFETs have a fin channel with a width and height of 22 nm and 230 nm, respectively, corresponding to an aspect ratio of 10.5. The electrical and temperature properties of the FinFETs are described in detail in this paper. The poly-Si FinFETs exhibit a steep subthreshold swing (196 mV/dec), a low leakage current (∼10-14 A), a high on/off current ratio (2.2 × 107 at VDS = 0.1 V), and a low drain-induced barrier lowering effect (0.28 V). The excellent switching characteristics are attributed to the ultrathin channel body and the multi-gate structure combined with high-k Al2O3 dielectric. Furthermore, the electron field-effective mobility increases as the temperature increases. An analytical fitting model was derived and was utilized to account for this phenomenon. The fitting results indicate that the positive temperature coefficient originates from the grain boundary-controlled mechanism in the low gate voltage regime.

  11. Optimization of laser energy deposition for single-shot high aspect-ratio microstructuring of thick BK7 glass

    Energy Technology Data Exchange (ETDEWEB)

    Garzillo, Valerio; Grigutis, Robertas [Dipartimento di Scienza e Alta Tecnologia, University of Insubria, Via Valleggio 11, I-22100 Como (Italy); Jukna, Vytautas [Centre de Physique Theorique, CNRS, Ecole Polytechnique, Université Paris-Saclay, F-91128 Palaiseau (France); LOA, ENSTA-ParisTech, CNRS, Ecole Polytechnique, Université Paris Saclay, F-91762 Palaiseau (France); Couairon, Arnaud [Centre de Physique Theorique, CNRS, Ecole Polytechnique, Université Paris-Saclay, F-91128 Palaiseau (France); Di Trapani, Paolo [Dipartimento di Scienza e Alta Tecnologia, University of Insubria and CNISM UdR Como, Via Valleggio 11, I-22100 Como (Italy); Jedrkiewicz, Ottavia, E-mail: ottavia.jedrkiewicz@ifn.cnr.it [Istituto di Fotonica e Nanotecnologie, CNR and CNISM UdR Como, Via Valleggio 11, I-22100 Como (Italy)

    2016-07-07

    We investigate the generation of high aspect ratio microstructures across 0.7 mm thick glass by means of single shot Bessel beam laser direct writing. We study the effect on the photoinscription of the cone angle, as well as of the energy and duration of the ultrashort laser pulse. The aim of the study is to optimize the parameters for the writing of a regular microstructure due to index modification along the whole sample thickness. By using a spectrally resolved single pulse transmission diagnostics at the output surface of the glass, we correlate the single shot material modification with observations of the absorption in different portions of the retrieved spectra, and with the absence or presence of spectral modulation. Numerical simulations of the evolution of the Bessel pulse intensity and of the energy deposition inside the sample help us interpret the experimental results that suggest to use picosecond pulses for an efficient and more regular energy deposition. Picosecond pulses take advantage of nonlinear plasma absorption and avoid temporal dynamics effects which can compromise the stationarity of the Bessel beam propagation.

  12. Optimization of laser energy deposition for single-shot high aspect-ratio microstructuring of thick BK7 glass

    Science.gov (United States)

    Garzillo, Valerio; Jukna, Vytautas; Couairon, Arnaud; Grigutis, Robertas; Di Trapani, Paolo; Jedrkiewicz, Ottavia

    2016-07-01

    We investigate the generation of high aspect ratio microstructures across 0.7 mm thick glass by means of single shot Bessel beam laser direct writing. We study the effect on the photoinscription of the cone angle, as well as of the energy and duration of the ultrashort laser pulse. The aim of the study is to optimize the parameters for the writing of a regular microstructure due to index modification along the whole sample thickness. By using a spectrally resolved single pulse transmission diagnostics at the output surface of the glass, we correlate the single shot material modification with observations of the absorption in different portions of the retrieved spectra, and with the absence or presence of spectral modulation. Numerical simulations of the evolution of the Bessel pulse intensity and of the energy deposition inside the sample help us interpret the experimental results that suggest to use picosecond pulses for an efficient and more regular energy deposition. Picosecond pulses take advantage of nonlinear plasma absorption and avoid temporal dynamics effects which can compromise the stationarity of the Bessel beam propagation.

  13. Ionic transport through sub-10 nm diameter hydrophobic high-aspect ratio nanopores: experiment, theory and simulation.

    Science.gov (United States)

    Balme, Sébastien; Picaud, Fabien; Manghi, Manoel; Palmeri, John; Bechelany, Mikhael; Cabello-Aguilar, Simon; Abou-Chaaya, Adib; Miele, Philippe; Balanzat, Emmanuel; Janot, Jean Marc

    2015-06-03

    Fundamental understanding of ionic transport at the nanoscale is essential for developing biosensors based on nanopore technology and new generation high-performance nanofiltration membranes for separation and purification applications. We study here ionic transport through single putatively neutral hydrophobic nanopores with high aspect ratio (of length L = 6 μm with diameters ranging from 1 to 10 nm) and with a well controlled cylindrical geometry. We develop a detailed hybrid mesoscopic theoretical approach for the electrolyte conductivity inside nanopores, which considers explicitly ion advection by electro-osmotic flow and possible flow slip at the pore surface. By fitting the experimental conductance data we show that for nanopore diameters greater than 4 nm a constant weak surface charge density of about 10(-2) C m(-2) needs to be incorporated in the model to account for conductance plateaus of a few pico-siemens at low salt concentrations. For tighter nanopores, our analysis leads to a higher surface charge density, which can be attributed to a modification of ion solvation structure close to the pore surface, as observed in the molecular dynamics simulations we performed.

  14. Mechanisms involved in the hydrothermal growth of ultra-thin and high aspect ratio ZnO nanowires

    Science.gov (United States)

    Demes, Thomas; Ternon, Céline; Morisot, Fanny; Riassetto, David; Legallais, Maxime; Roussel, Hervé; Langlet, Michel

    2017-07-01

    Hydrothermal synthesis of ZnO nanowires (NWs) with tailored dimensions, notably high aspect ratios (AR) and small diameters, is a major concern for a wide range of applications and still represents a challenging and recurring issue. In this work, an additive-free and reproducible hydrothermal procedure has been developed to grow ultra-thin and high AR ZnO NWs on sol-gel deposited ZnO seed layers. Controlling the substrate temperature and using a low reagent concentration (1 mM) has been found to be essential for obtaining such NWs. We show that the NW diameter remains constant at about 20-25 nm with growth time contrary to the NW length that can be selectively increased leading to NWs with ARs up to 400. On the basis of investigated experimental conditions along with thermodynamic and kinetic considerations, a ZnO NW growth mechanism has been developed which involves the formation and growth of nuclei followed by NW growth when the nuclei reach a critical size of about 20-25 nm. The low reagent concentration inhibits NW lateral growth leading to ultra-thin and high AR NWs. These NWs have been assembled into electrically conductive ZnO nanowire networks, which opens attractive perspectives toward the development of highly sensitive low-cost gas- or bio-sensors.

  15. Nanoscale tomographic reconstruction of the subsurface mechanical properties of low-k high-aspect ratio patterns

    Science.gov (United States)

    Stan, Gheorghe; Mays, Ebony; Yoo, Hui Jae; King, Sean W.

    2016-12-01

    In this work, intermittent contact resonance atomic force microscopy (ICR-AFM) was performed on high-aspect ratio a-SiOC:H patterned fins (100 nm in height and width from 20 to 90 nm) to map the depth and width dependencies of the material stiffness. The spatial resolution and depth sensitivity of the measurements were assessed from tomographic cross-sections over various regions of interest within the 3D space of the measurements. Furthermore, the depth-dependence of the measured contact stiffness over the scanned area was used to determine the sub-surface variation of the elastic modulus at each point in the scan. This was achieved by iteratively adjusting the local elastic profile until the depth dependence of the resulted contact stiffness matched the depth dependence of the contact stiffness measured by ICR-AFM at that location. The results of this analysis were assembled into nanoscale sub-surface tomographic images of the elastic modulus of the investigated SiOC:H patterns. A new 3D structure-property representation emerged from these tomographic images with direct evidence for the alterations sustained by the structures during processing.

  16. Aerodynamic Properties of Rough Surfaces with High Aspect-Ratio Roughness Elements: Effect of Aspect Ratio and Arrangements

    Science.gov (United States)

    Sadique, Jasim; Yang, Xiang I. A.; Meneveau, Charles; Mittal, Rajat

    2017-05-01

    We examine the effect of varying roughness-element aspect ratio on the mean velocity distributions of turbulent flow over arrays of rectangular-prism-shaped elements. Large-eddy simulations (LES) in conjunction with a sharp-interface immersed boundary method are used to simulate spatially-growing turbulent boundary layers over these rough surfaces. Arrays of aligned and staggered rectangular roughness elements with aspect ratio >1 are considered. First the temporally- and spatially-averaged velocity profiles are used to illustrate the aspect-ratio effects. For aligned prisms, the roughness length (z_o) and the friction velocity (u_*) increase initially with an increase in the roughness-element aspect ratio, until the values reach a plateau at a particular aspect ratio. The exact value of this aspect ratio depends on the coverage density. Further increase in the aspect ratio changes neither z_o, u_* nor the bulk flow above the roughness elements. For the staggered cases, z_o and u_* continue to increase for the surface coverage density and the aspect ratios investigated. To model the flow response to variations in roughness aspect ratio, we turn to a previously developed phenomenological volumetric sheltering model (Yang et al., in J Fluid Mech 789:127-165, 2016), which was intended for low to moderate aspect-ratio roughness elements. Here, we extend this model to account for high aspect-ratio roughness elements. We find that for aligned cases, the model predicts strong mutual sheltering among the roughness elements, while the effect is much weaker for staggered cases. The model-predicted z_o and u_* agree well with the LES results. Results show that the model, which takes explicit account of the mutual sheltering effects, provides a rapid and reliable prediction method of roughness effects in turbulent boundary-layer flows over arrays of rectangular-prism roughness elements.

  17. pH-Dependent Toxicity of High Aspect Ratio ZnO Nanowires in Macrophages Due to Intracellular Dissolution

    KAUST Repository

    H. Müller, Karin

    2010-11-23

    High-aspect ratio ZnO nanowires have become one of the most promising products in the nanosciences within the past few years with a multitude of applications at the interface of optics and electronics. The interaction of zinc with cells and organisms is complex, with both deficiency and excess causing severe effects. The emerging significance of zinc for many cellular processes makes it imperative to investigate the biological safety of ZnO nanowires in order to guarantee their safe economic exploitation. In this study, ZnO nanowires were found to be toxic to human monocyte macrophages (HMMs) at similar concentrations as ZnCl2. Confocal microscopy on live cells confirmed a rise in intracellular Zn2+ concentrations prior to cell death. In vitro, ZnO nanowires dissolved very rapidly in a simulated body fluid of lysosomal pH, whereas they were comparatively stable at extracellular pH. Bright-field transmission electron microscopy (TEM) showed a rapid macrophage uptake of ZnO nanowire aggregates by phagocytosis. Nanowire dissolution occurred within membrane-bound compartments, triggered by the acidic pH of the lysosomes. ZnO nanowire dissolution was confirmed by scanning electron microscopy/energy-dispersive X-ray spectrometry. Deposition of electron-dense material throughout the ZnO nanowire structures observed by TEM could indicate adsorption of cellular components onto the wires or localized zinc-induced protein precipitation. Our study demonstrates that ZnO nanowire toxicity in HMMs is due to pH-triggered, intracellular release of ionic Zn2+ rather than the high-aspect nature of the wires. Cell death had features of necrosis as well as apoptosis, with mitochondria displaying severe structural changes. The implications of these findings for the application of ZnO nanowires are discussed. © 2010 American Chemical Society.

  18. Fabrication of high aspect ratio TiO{sub 2} and Al{sub 2}O{sub 3} nanogratings by atomic layer deposition

    Energy Technology Data Exchange (ETDEWEB)

    Shkondin, Evgeniy, E-mail: eves@fotonik.dtu.dk [Department of Photonics Engineering, Technical University of Denmark, DK-2800 Kongens Lyngby, Denmark and Danish National Center for Micro- and Nanofabrication (DANCHIP), DK-2800 Kongens Lyngby (Denmark); Takayama, Osamu; Lavrinenko, Andrei V. [Department of Photonics Engineering, Technical University of Denmark, DK-2800 Kongens Lyngby (Denmark); Lindhard, Jonas Michael; Larsen, Pernille Voss; Mar, Mikkel Dysseholm; Jensen, Flemming [Danish National Center for Micro- and Nanofabrication (DANCHIP), DK-2800 Kongens Lyngby (Denmark)

    2016-05-15

    The authors report on the fabrication of TiO{sub 2} and Al{sub 2}O{sub 3} nanostructured gratings with an aspect ratio of up to 50. The gratings were made by a combination of atomic layer deposition (ALD) and dry etch techniques. The workflow included fabrication of a Si template using deep reactive ion etching followed by ALD of TiO{sub 2} or Al{sub 2}O{sub 3}. Then, the template was etched away using SF{sub 6} in an inductively coupled plasma tool, which resulted in the formation of isolated ALD coatings, thereby achieving high aspect ratio grating structures. SF{sub 6} plasma removes silicon selectively without any observable influence on TiO{sub 2} or Al{sub 2}O{sub 3}, thus revealing high selectivity throughout the fabrication. Scanning electron microscopy was used to analyze every fabrication step. Due to nonreleased stress in the ALD coatings, the top parts of the gratings were observed to bend inward as the Si template was removed, thus resulting in a gradual change in the pitch value of the structures. The pitch on top of the gratings is 400 nm, and it gradually reduces to 200 nm at the bottom. The form of the bending can be reshaped by Ar{sup +} ion beam etching. The chemical purity of the ALD grown materials was analyzed by x-ray photoelectron spectroscopy. The approach presented opens the possibility to fabricate high quality optical metamaterials and functional nanostructures.

  19. FFT-impedance spectroscopy analysis of the growth of magnetic metal nanowires in ultra-high aspect ratio InP membranes

    Science.gov (United States)

    Gerngross, M.-D.; Carstensen, J.; Föll, H.; Adelung, R.

    2016-01-01

    This paper reports on the characterization of the electrochemical growth process of magnetic nanowires in ultra-high-aspect ratio InP membranes via in situ fast Fourier transform impedance spectroscopy in a typical frequency range from 75 Hz to 18.5 kHz. The measured impedance data from the Ni, Co, and FeCo can be very well fitted using the same electric equivalent circuit consisting of a series resistance in serial connection to an RC-element and a Maxwell element. The impedance data clearly indicate the similarities in the growth behavior of Ni, Co and FeCo nanowires in ultra-high aspect ratio InP membranes—the beneficial impact of boric acid on the metal deposition in ultra-high aspect ratio membranes and the diffusion limitation of boric acid, as well as differences such as passivation or side reactions.

  20. Application of Self-Assembled Monolayers to the Electroless Metallization of High Aspect Ratio Vias for Microelectronics

    Science.gov (United States)

    Bernasconi, R.; Molazemhosseini, A.; Cervati, M.; Armini, S.; Magagnin, L.

    2016-10-01

    All-wet electroless metallization of through-silicon vias (TSVs) with a width of 5 μm and a 1:10 aspect ratio was carried out. Immersion in a n-(2-aminoethyl) 3-aminopropyl-trimethoxysilane (AEAPTMS) self-assembled monolayer (SAM) was used to enhance the adhesion between the metal film and substrate. Contact angle variation and atomic force microscopy were used to verify the formation of a SAM layer. A PdCl2 solution was later used to activate the silanized substrates, exploiting the affinity of the -NH3 functional group of AEAPTMS to palladium. A nickel-phosphorus-boron electroless bath was employed to deposit the first barrier layer onto silicon. The NiPB growth rate was evaluated on flat silicon wafers, while the structure of the coating obtained was investigated via glow discharge optical emission spectroscopy. Cross-sectional scanning electron microscope observations were carried out on metallized TSVs to characterize the NiPB seed, the Cu seed layer deposited with a second electroless step, and the Cu superfilling obtained with a commercial solution. Complete filling of TSV was achieved.

  1. Numerical design of X-ray tabletop Talbot interferometer using polycapillary optics as two-dimensional gratings with high aspect ratio

    Science.gov (United States)

    Sun, Weiyuan; Liu, Zhiguo; Sun, Tianxi; Sun, Xuepeng; Li, Fangzuo; Jiang, Bowen; Ding, Xunliang

    2015-12-01

    The polycapillary optics was proposed to be used as two-dimensional X-ray gratings with high aspect ratios for high energy X-rays. The X-ray Talbot interferometer was designed numerically using the polycapillary X-ray gratings and a conventional X-ray source. The simulation showed that it was available to get a high-aspect-ratio pattern of the polycapillary X-ray gratings for higher energies than 60 keV. Moreover, this design of polycapillary gratings decreased the requirement for high power of the X-ray source. The polycapillary X-ray gratings had potential applications in X-ray imaging technology for medical fields, industrial nondestructive tests, public security, physical science, chemical analysis, life science, nanoscience biology and energy science.

  2. Electrically conducting, ultra-sharp, high aspect-ratio probes for AFM fabricated by electron-beam-induced deposition of platinum

    Energy Technology Data Exchange (ETDEWEB)

    Brown, Jason, E-mail: jason.brown@physics.ox.ac.uk [Clarendon Laboratory, Department of Physics, University of Oxford, Oxford OX1 3PU (United Kingdom); Kocher, Paul; Ramanujan, Chandra S; Sharp, David N [Clarendon Laboratory, Department of Physics, University of Oxford, Oxford OX1 3PU (United Kingdom); Torimitsu, Keiichi [NTT Basic Research Laboratories, NTT Corporation, Atsugi, 243-0198 (Japan); Ryan, John F [Clarendon Laboratory, Department of Physics, University of Oxford, Oxford OX1 3PU (United Kingdom)

    2013-10-15

    We report on the fabrication of electrically conducting, ultra-sharp, high-aspect ratio probes for atomic force microscopy by electron-beam-induced deposition of platinum. Probes of 4.0 ±1.0 nm radius-of-curvature are routinely produced with high repeatability and near-100% yield. Contact-mode topographical imaging of the granular nature of a sputtered gold surface is used to assess the imaging performance of the probes, and the derived power spectral density plots are used to quantify the enhanced sensitivity as a function of spatial frequency. The ability of the probes to reproduce high aspect-ratio features is illustrated by imaging a close-packed array of nanospheres. The electrical resistance of the probes is measured to be of order 100 kΩ. - Highlights: • Electrically conducting, ultra-sharp, high aspect-ratio probes for AFM with radius-of-curvature 4.0±±1.0 nm. • AFM probe fabrication by electron-beam-induced deposition of platinum. • Enhanced spatial resolution demonstrated through AFM of sputtered gold grains. • AFM imaging of deep clefts and recesses on a close-packed array of nanospheres.

  3. Engineered high aspect ratio vertical nanotubes as a model system for the investigation of catalytic methanol synthesis over Cu/ZnO.

    Science.gov (United States)

    Güder, Firat; Frei, Elias; Kücükbayrak, Umut M; Menzel, Andreas; Thomann, Ralf; Luptak, Roman; Hollaender, Bernd; Krossing, Ingo; Zacharias, Margit

    2014-02-12

    Catalytically synthesized methanol from H2 and CO2 using porous Cu/ZnO aggregates is a promising, carbon neutral, and renewable alternative to replace fossil fuel based transport fuels. However, the absence of surface-engineered model systems to understand and improve the industrial Cu/ZnO catalyst poses a big technological gap in efforts to increase industrial methanol conversion efficiency. In this work, we report a novel process for the fabrication of patterned, vertically aligned high aspect ratio 1D nanostructures on Si that can be used as an engineered model catalyst. The proposed strategy employs near-field phase shift lithography (NF-PSL), deep reactive ion etching (DRIE), and atomic layer deposition (ALD) to pattern, etch, and coat Si wafers to produce high aspect ratio 1D nanostructures. Using this method, we produced a model system consisting of high aspect ratio Cu-decorated ZnO nanotubes (NTs) to investigate the morphological effects of ZnO catalyst support in comparison to the planar Cu/ZnO catalyst in terms of the catalytic reactions. The engineered catalysts performed 70 times better in activating CO2 than the industrial catalyst. In light of the obtained results, several important points are highlighted, and recommendations are made to achieve higher catalytic performance.

  4. Electrochemical growth of Co nanowires in ultra-high aspect ratio InP membranes: FFT-impedance spectroscopy of the growth process and magnetic properties

    Science.gov (United States)

    2014-01-01

    The electrochemical growth of Co nanowires in ultra-high aspect ratio InP membranes has been investigated by fast Fourier transform-impedance spectroscopy (FFT-IS) in the frequency range from 75 Hz to 18.5 kHz. The impedance data could be fitted very well using an electric circuit equivalent model with a series resistance connected in series to a simple resistor-capacitor (RC) element and a Maxwell element. Based on the impedance data, the Co deposition in ultra-high aspect ratio InP membranes can be divided into two different Co deposition processes. The corresponding share of each process on the overall Co deposition can be determined directly from the transfer resistances of the two processes. The impedance data clearly show the beneficial impact of boric acid on the Co deposition and also indicate a diffusion limitation of boric acid in ultra-high aspect ratio InP membranes. The grown Co nanowires are polycrystalline with a very small grain size. They show a narrow hysteresis loop with a preferential orientation of the easy magnetization direction along the long nanowire axis due to the arising shape anisotropy of the Co nanowires. PMID:25050088

  5. Electrochemical growth of Co nanowires in ultra-high aspect ratio InP membranes: FFT-impedance spectroscopy of the growth process and magnetic properties

    Science.gov (United States)

    Gerngross, Mark-Daniel; Carstensen, Jürgen; Föll, Helmut

    2014-06-01

    The electrochemical growth of Co nanowires in ultra-high aspect ratio InP membranes has been investigated by fast Fourier transform-impedance spectroscopy (FFT-IS) in the frequency range from 75 Hz to 18.5 kHz. The impedance data could be fitted very well using an electric circuit equivalent model with a series resistance connected in series to a simple resistor-capacitor ( RC) element and a Maxwell element. Based on the impedance data, the Co deposition in ultra-high aspect ratio InP membranes can be divided into two different Co deposition processes. The corresponding share of each process on the overall Co deposition can be determined directly from the transfer resistances of the two processes. The impedance data clearly show the beneficial impact of boric acid on the Co deposition and also indicate a diffusion limitation of boric acid in ultra-high aspect ratio InP membranes. The grown Co nanowires are polycrystalline with a very small grain size. They show a narrow hysteresis loop with a preferential orientation of the easy magnetization direction along the long nanowire axis due to the arising shape anisotropy of the Co nanowires.

  6. Fabrication of high-aspect-ratio microstructures in polymer microfluid chips for in vitro single-cell analysis

    Science.gov (United States)

    Bukatin, A. S.; Mukhin, I. S.; Malyshev, E. I.; Kukhtevich, I. V.; Evstrapov, A. A.; Dubina, M. V.

    2016-10-01

    Technologies and methods of prototyping microfluidic devices are widely used in solving many biological problems and testing of operability of new microanalytic systems. This study is devoted to analyzing the features of the formation of microstructures in SU-8 photoresist and the preparation of replicas in polydimethyl siloxane by the soft lithography method. It has been shown that the aspect ratio of the resultant microstructures is determined by their shape, size, and the force of resist adhesion to the silicon substrate and the efficiency of the circulation of the developer around microstructures. In the replication of complex microstructures, an aspect ratio of 25 is attained. The technology considered here is used to prepare microfluidic chips with mechanical traps for fixation and the in vitro analysis of living cells.

  7. A high aspect ratio SU-8 fabrication technique for hollow microneedles for transdermal drug delivery and blood extraction

    Science.gov (United States)

    Chaudhri, Buddhadev Paul; Ceyssens, Frederik; De Moor, Piet; Van Hoof, Chris; Puers, Robert

    2010-06-01

    Protein drugs, e.g. hormonal drugs, cannot be delivered orally to a patient as they get digested in the gastro-intestinal (GI) tract. Thus, it is imperative that these kinds of drugs are delivered transdermally through the skin. To provide for real-time feedback as well as to test independently for various substances in the blood, we also need a blood sampling system. Microneedles can perform both these functions. Further, microneedles made of silicon or metal have the risk of breaking inside the skin thereby leading to complications. SU-8, being approved of as being biocompatible by the Food and Drug Agency (FDA) of the United States, is an attractive alternative because firstly it is a polymer material, thereby reducing the chances of breakages inside the skin, and secondly it is a negative photoresist, thereby leading to ease of fabrication. Thus, here we present very tall (around 1600 µm) SU-8 polymer-based hollow microneedles fabricated by a simple and repeatable process, which are a very good candidate for transdermal drug delivery as well as blood extraction. The paper elaborates on the details that allow the fabrication of such extreme aspect ratios (>100).

  8. High aspect ratio, nanostructured, platinum based electrodes for proton exchange membrane fuel cells: Design, development and ionic conduction of the proposed structures

    Science.gov (United States)

    Paschos, Odysseas

    High aspect ratio nanostructures can provide substantial benefits when used as fuel cell electrodes since they can alleviate problems associated with conventional carbon supports. In this work the potential of incorporating high aspect ratio nanostructures as electrodes for fuel cells was studied. Moreover, a model was created that demonstrated the potential for the nanostructures to yield high performance. The creation of Pt nanorods using anodic aluminum oxide templates was investigated and experiments showed complete utilization of the electrodes surface area. However, the Pt nanorod structure was found to not be effective in terms of Pt mass utilization, since only the outer surface of the rod is utilized for catalytic activity. An alternate method was developed to coat (with Pt) high aspect ratio structures made from a cost-effective support material. Thus far, methods used to conformally coat Pt either cannot be used directly on several materials or tend not to be cost-effective. A non-vacuum method based on an Aerosol Assisted Deposition (AAD) technique was developed and optimized. Initial experiments showed feasibility of the technique to coat a large variety of substrates. Dimensions of the particles were controlled by the deposition parameters and ranged from 4 nm up to several hundreds of nm in diameter. Experiments where Pt nanoparticles were deposited on gas diffusion layer substrates, showed higher electrochemical performance compared to commercial catalyst. The need for electrolyte coating on the high aspect ratio structures was also investigated. Initial experiments were performed by splitting an MEA in half and using an intermediate Pt film. These experiments showed that ionic conduction on Pt surface is possible. Moreover these studies indicated that ionic conduction on Pt could result from hydrophilic groups that can exist on its surface. Since these groups can either be physisorbed due to presence of water or chemisorbed on the oxidized Pt

  9. Solution Process Synthesis of High Aspect Ratio ZnO Nanorods on Electrode Surface for Sensitive Electrochemical Detection of Uric Acid

    Science.gov (United States)

    Ahmad, Rafiq; Tripathy, Nirmalya; Ahn, Min-Sang; Hahn, Yoon-Bong

    2017-04-01

    This study demonstrates a highly stable, selective and sensitive uric acid (UA) biosensor based on high aspect ratio zinc oxide nanorods (ZNRs) vertical grown on electrode surface via a simple one-step low temperature solution route. Uricase enzyme was immobilized on the ZNRs followed by Nafion covering to fabricate UA sensing electrodes (Nafion/Uricase-ZNRs/Ag). The fabricated electrodes showed enhanced performance with attractive analytical response, such as a high sensitivity of 239.67 μA cm-2 mM-1 in wide-linear range (0.01-4.56 mM), rapid response time (~3 s), low detection limit (5 nM), and low value of apparent Michaelis-Menten constant (Kmapp, 0.025 mM). In addition, selectivity, reproducibility and long-term storage stability of biosensor was also demonstrated. These results can be attributed to the high aspect ratio of vertically grown ZNRs which provides high surface area leading to enhanced enzyme immobilization, high electrocatalytic activity, and direct electron transfer during electrochemical detection of UA. We expect that this biosensor platform will be advantageous to fabricate ultrasensitive, robust, low-cost sensing device for numerous analyte detection.

  10. Protein-enabled layer-by-layer syntheses of aligned, porous-wall, high-aspect-ratio TiO{sub 2} nanotube arrays

    Energy Technology Data Exchange (ETDEWEB)

    Berrigan, John D.; Cai, Ye; Sandhage, Kenneth H. [School of Materials Science and Engineering, Air Force Center of Excellence on Bio-Nano-Enabled Inorganic/Organic Nanocomposites and Improved Cognition (BIONIC), Georgia Institute of Technology, 771 Ferst Drive, Atlanta, Georgia 30332-0400 (United States); Kang, Tae-Sik; Deneault, James R.; Durstock, Michael F. [Materials and Manufacturing Directorate, Air Force Research Laboratory, Wright-Patterson Air Force Base, Ohio, 45433-7702 (United States)

    2011-05-10

    An aqueous, protein-enabled (biomimetic), layer-by-layer titania deposition process is developed, for the first time, to convert aligned-nanochannel templates into high-aspect-ratio, aligned nanotube arrays with thin (34 nm) walls composed of co-continuous networks of pores and titania nanocrystals (15 nm ave. size). Alumina templates with aligned open nanochannels are exposed in an alternating fashion to aqueous protamine-bearing and titania precursor-bearing (Ti(IV) bis-ammonium-lactato-dihydroxide, TiBALDH) solutions. The ability of protamine to bind to alumina and titania, and to induce the formation of a Ti-O-bearing coating upon exposure to the TiBALDH precursor, enables the layer-by-layer deposition of a conformal protamine/Ti-O-bearing coating on the nanochannel surfaces within the porous alumina template. Subsequent protamine pyrolysis yields coatings composed of co-continuous networks of pores and titania nanoparticles. Selective dissolution of the underlying alumina template through the porous coating then yields freestanding, aligned, porous-wall titania nanotube arrays. The interconnected pores within the nanotube walls allow enhanced loading of functional molecules (such as a Ru-based N719 dye), whereas the interconnected titania nanoparticles enable the high-aspect-ratio, aligned nanotube arrays to be used as electrodes (as demonstrated for dye-sensitized solar cells with power conversion efficiencies of 5.2 {+-} 0.4%). (Copyright copyright 2011 WILEY-VCH Verlag GmbH and Co. KGaA, Weinheim)

  11. High-Yield Synthesis of Uniform Ag Nanowires with High Aspect Ratios by Introducing the Long-Chain PVP in an Improved Polyol Process

    Directory of Open Access Journals (Sweden)

    Jie-Jun Zhu

    2011-01-01

    Full Text Available Polyvinyl pyrrolidone (PVP with different molecular weights was used as capping agent to synthesize silver nanowires through a polyol process. The results indicated that the yields and aspect ratios of silver nanowires were controlled by the chain length of PVP and increased with increasing the molecular weight (MW of PVP. When the long-chain PVP-K90 (MW = 800,000 was used, the product was uniform in size and was dominated by nanowires with high aspect ratios. The growth mechanism of the nanowires was studied. It is proposed that the chemical adsorption of Ag+ on the PVP chains at the initial stage promotes the growth of Ag nanowires.

  12. Design, fabrication and characterization of high-stroke high-aspect ratio micro electro mechanical systems deformable mirrors for adaptive optics

    Science.gov (United States)

    Fernandez Rocha, Bautista

    Adaptive optic (AO) systems for next generation of extremely large telescopes (30--50 meter diameter primary mirrors) require high-stroke (10 microns), high-order (100x100) deformable mirrors at lower-cost than current technology. The required specifications are achievable with Micro Electro Mechanical Systems (MEMS) devices fabricated with high-aspect ratio processing techniques. This dissertation will review simulation results compared with displacement measurements of actuators utilizing a white-light interferometer. It will also review different actuator designs, materials and post-processing procedures fabricated in three different high-aspect ratio processes, Microfabrica's Electrochemical Fabrication (EFAB(TM)), HT-Micro's Precision Fabrication Technology (HTPF(TM)), and Innovative Micro Technologies (IMT) fabrication process. These manufacturing processes allow high-precision multilayer fabrication and their sacrificial layer thicknesses can be specified by the designer, rather than by constraints of the fabrication process. Various types of high-stroke gold actuators for AO consisting of folded springs with rectangular and circular membranes as well as X-beam actuators supported diagonally by beams were designed, simulated, fabricated, and tested individually and as part of a continuous facesheet DM system. The design, modeling and simulation of these actuators are compared to experimental measurements of their pull-in voltages, which characterizes their stiffness and maximum stroke. Vertical parallel plate ganged actuators fabricated with the EFAB(TM) process have a calculated pull-in voltage of 95V for a 600mum size device. In contrast, the pull-in voltages for the comb-drive actuators ranged from 55V for the large actuator, to 203V for the smallest actuator. Simulations and interferometer scans of actuator designs fabricated with HT-Micro's Precision Fabrication (HTPF(TM)) two wafer bonded process with different spring supports have shown the ability of

  13. 高厚径比HDI板电镀能力研究%Plating ability Of HDI with high aspect ratio item

    Institute of Scientific and Technical Information of China (English)

    班向东

    2013-01-01

    With the development of information technology, more layers, thickness, aperture smaller, thicker wiring denser PCB needs PCB manufacturers put forward higher requirements. High aspect ratio and BMV plating are two different processing direction of PCB plating, and the two requirements of both the product processing is the dififculty of electroplating. So to ifnd a balance between the two is very important. Through the experiment, we found the electroplating parameters, achieved the balance of the blind holes.%随着信息技术的不断发展,层数更多、板厚更厚、孔径更小、布线更密的PCB需求给PCB生产厂家提出的更高的要求。高纵横比与盲孔电镀是PCB电镀的两个不同的加工方向,而这两种要求并存的产品加工是电镀的难点,因此找到两者之间的平衡点至关重要。本文通过实验,找到两者兼顾的电镀参数,达到通盲孔兼顾的效果。

  14. Fabrication of high-aspect-ratio double-slot photonic crystal waveguide in InP heterostructure by inductively coupled plasma etching using ultra-low pressure

    Directory of Open Access Journals (Sweden)

    Kaiyu Cui

    2013-02-01

    Full Text Available Double-slot photonic crystal waveguide (PCW in InP heterostructure is fabricated by inductively coupled plasma (ICP etching. Due to using an ultra-low pressure of 0.05 Pa, etch depths up to 3.5 μm for holes with diameter of 200 nm and 1.8 μm for slots of ∼40 nm are achieved, which indicate a record-high aspect-ratio, i.e. 45, for such narrow slots in InP heterostructure. Moreover, etching quality is evaluated based on both the transmission performance and the linewidth of micro-photoluminescence (μ-PL. In our measurement, a structure-dependent transmission-dip about 17 dB is obtained from a 17-μm-long W3 PCW, and a PL widening as small as 19 nm compared to the corresponding wafer is observed. These promising experimental results evidence the high etching quality realized in this work and confirm the feasibility of etching small-feature-size patterns by ICP technology for InP based devices in future mono-/hetero-integrated photonic circuits.

  15. Catalytic Synthesis of Substrate-Free, Aligned and Tailored High Aspect Ratio Multiwall Carbon Nanotubes in an Ultrasonic Atomization Head CVD Reactor

    Directory of Open Access Journals (Sweden)

    Fahad Ali Rabbani

    2016-01-01

    Full Text Available Chemical vapor deposition (CVD method has proven its benchmark, over other methods, for the production of different types of carbon nanotubes (CNT on commercial and lab scale. In this study, an injection vertical CVD reactor fitted with an ultrasonic atomization head was used in a pilot-plant scale (height 274 cm, radius 25 cm for semicontinuous production of multiwall carbon nanotubes (MWCNTs. p-Xylene was used as a hydrocarbon precursor in which ferrocene was dissolved and provided the cracking catalyst. Atomization of the feed solution resulted in full and even dispersion of the catalytic solution. This dispersion led to the production of high aspect ratio MWCNTs (ranging from 8,000 to 12,000 at 850°C. Different experimental parameters affecting the quality and quantity of the produced CNTs were investigated. These included temperature, reaction time, and flow rate of the reaction and carrier gases. Different properties of the produced CNTs were characterized using SEM and TEM, while TGA was used to evaluate their purity. Specific surface area of selected samples was calculated by BET.

  16. 大展弦比飞翼布局飞机的三轴稳定特性%Three-axis stability characteristics of flying wing with high aspect ratio

    Institute of Scientific and Technical Information of China (English)

    张子军; 王磊; 王立新; 王晋军

    2012-01-01

    飞翼布局飞机取消了平尾和垂尾,构型的改变和阻力方向舵的使用使其呈现出与常规布局飞机不同的三轴稳定特性.以大展弦比飞翼布局飞机为研究对象,开展了其三轴静、动稳定特性的研究;通过与常规大展弦比飞机进行对比,揭示了飞翼构型参数、典型飞行状态对其稳定性的影响规律;分析了阻力方向舵的偏转对此类飞机稳定性的影响.研究结果表明,大展弦比飞翼布局飞机的本体稳定性存在诸多的不足.%A flying wing cancels horizontal and vertical tails, but the changes of configuration and the use of drag rudder make it differ much from the conventional configuration aircraft in three-axis stability characteristics. The aircraft chosen for the study is a flying wing with high aspect ratio. Its three-axis static and dynamic stability characteristics are studied. Comparing with the conventional configuration aircraft with high aspect ratio, the effects of configuration parameters and typical flight condition on the stabilities of the flying wing are discussed. The impact of the drag rudder on the stabilities of such aircraft types is also analyzed. Results show that there are many deficiencies in the inherent three-axis stabilities of the high aspect ratio flying wing.

  17. Design and fabrication of electrostatic microcolumn in multiple electron-beam lithography

    Science.gov (United States)

    Du, Zhidong; Wen, Ye; Traverso, Luis; Datta, Anurup; Chen, Chen; Xu, Xianfan; Pan, Liang

    2016-03-01

    Microcolumns are widely used for parallel electron-beam lithography because of their compactness and the ability to achieve high spatial resolution. A design of an electrostatic microcolumn for our recent nanoscale photoemission sources is presented. We proposed a compact column structure (as short as several microns in length) for the ease of microcolumn fabrication and lithography operation. We numerically studied the influence of several design parameters on the optical performance such as microcolumn diameter, electrode thickness, beam current, working voltages, and working distance. We also examined the effect of fringing field between adjacent microcolumns during parallel lithography operations. The microcolumns were also fabricated to show the possibility.

  18. Injection Molding of High Aspect Ratio Nanostructures

    DEFF Research Database (Denmark)

    Matschuk, Maria; Larsen, Niels Bent

    We present a process for injection molding of 40 nm wide and >100 nm high pillars (pitch: 200 nm). We explored the effects of mold coatings and injection molding conditions on the replication quality of nanostructures in cyclic olefin copolymer. We found that optimization of molding parameters...

  19. Micro-column Scanning Electron Microscope and X-ray Spectrometer (MSEMS) for Planetary Exploration

    Science.gov (United States)

    Ribaya, B.; Niemann, D.; Makarewicz, J.; Clevenson, H.; McKenzie, C.; Nguyen, C.; Blake, D. F.

    2009-12-01

    Scanning Electron Microscopy combined with electron-induced X-ray Fluorescence Spectroscopy (SEM-EDX) is one of the most powerful techniques for characterizing sub-µm surface morphology and composition. In terrestrial laboratories, SEM-EDX is used to elucidate natural processes such as low-temperature diagenesis, thermal or pressure induced metamorphism, volcanism/magmatism, atmosphere/crust interaction and biological activity. Such information would be highly useful for investigating the natural history of the terrestrial planets, satellites and primitive bodies, providing morphological and elemental information that is 2 orders of magnitude higher in resolution than optical techniques. Below we describe the development of a Micro-column Scanning Electron Microscope and X-ray Spectrometer (MSEMS) for flight. The enabling technology of the MSEMS is a carbon nanotube field emission (CNTFE) electron source that is integrated with micro-electro-mechanical-systems (MEMS) - based electron gun and electron optical structures. A hallmark of CNTFE electron sources is their low chromatic aberration, which reduces the need for high accelerating voltages to obtain small spot size. The CNTFE also offers exceptional brightness and nanometer source size, eliminating the need for condenser lenses, making simple electrostatic focusing optics possible. Moreover, the CNT field emission gun (CFEG) at low operating voltage dissipates 103 less power than thermally-assisted Schottky emitters. A key feature of the MSEMS design is the lack of scanning coils. Rather, a piezoelectric sample stage capable of sub-nanometer resolution scans the sample past the fixed crossover of the MSEMS electron beam. We will describe a MEMS-based templating technique for fabricating mechanically and electrically stable miniature CFEGs. Using existing silicon (Si) technology, we fabricated highly controlled and precise MEMS structures for both the CNT cathode and focusing optics for the micro-column. The

  20. Wind-tunnel investigation of longitudinal and lateral-directional stability and control characteristics of a 0.237-scale model of a remotely piloted research vehicle with a thick, high-aspect-ratio supercritical wing

    Science.gov (United States)

    Byrdsong, T. A.; Brooks, C. W., Jr.

    1980-01-01

    A 0.237-scale model of a remotely piloted research vehicle equipped with a thick, high-aspect-ratio supercritical wing was tested in the Langley 8-foot transonic tunnel to provide experimental data for a prediction of the static stability and control characteristics of the research vehicle as well as to provide an estimate of vehicle flight characteristics for a computer simulation program used in the planning and execution of specific flight-research mission. Data were obtained at a Reynolds number of 16.5 x 10 to the 6th power per meter for Mach numbers up to 0.92. The results indicate regions of longitudinal instability; however, an adequate margin of longitudinal stability exists at a selected cruise condition. Satisfactory effectiveness of pitch, roll, and yaw control was also demonstrated.

  1. Microcolumns with self-assembled particle frits for proteomics

    DEFF Research Database (Denmark)

    Ishihama, Yasushi; Rappsilber, Juri; Andersen, Jens S;

    2002-01-01

    LC-MS-MS experiments in proteomics are usually performed with packed microcolumns employing frits or outlets smaller than the particle diameter to retain the packing material. We have developed packed microcolumns using self-assembled particles (SAPs) as frits that are smaller than the size...... of the outlet. A five to one ratio of outlet size to particle diameter appears to be the upper maximum. In these situations the particles assembled into an arch over the outlet like the stones in a stone bridge. When 3 microm particles were packed into a tapered column with an 8 microm outlet, two particles...

  2. Study on Static Test Technology for High-Aspect Ratio Wing of Full Scale Aircraft%全尺寸飞机大展弦比机翼静力试验技术研究

    Institute of Scientific and Technical Information of China (English)

    刘兴科; 刘冰; 张建锋

    2014-01-01

    In the bearing capability static test of wing structure,because of the high-aspect ratio, the large deformation will arouse load direction changed.Taking the full scale aircraft structure as research obj ect,a test loading technology is proposed,which can realize the extractive wing loading.The static test of a certain type aircraft structure solves the problems of large deforma-tion loading,which has great realistic significance and application value.%在大展弦比飞机的机翼承载能力试验中,试验加载方向会因其大变形发生变化。本文以全尺寸结构机翼为研究对象,提出一种试验加载技术,最大程度实现机翼载荷的准确施加。通过此静强度试验,很好地解决了机翼试验大变形加载问题,具有较大的现实意义和应用价值。

  3. Aeroelastic response for straight wing with high aspect ratio due to sharp edge gust%锐边突风对大展弦比机翼的气动弹性响应影响

    Institute of Scientific and Technical Information of China (English)

    刘伏虎; 马晓平

    2012-01-01

    基于Theodorsen非定常气动力理论,以大展弦比均匀直机翼为研究对象,建立了系统的气动弹性响应方程.选取二阶弯曲和二阶扭转模态,采用V-g法求解了系统的颤振速度.基于Kussner函数,建立了锐边突风系统模型,并推导了在弯曲和扭转模态阶数为Nw和Na下的系统状态方程,仿真研究了加入突风后系统的气动弹性响应.结果表明,加入突风后翼尖响应振幅增大.%Based on Theodorsen unsteady aerodynamics theory, the equation of aeroelastic response for straight wing with high aspect ratio is established. Flutter speed is determined for two bending modes and two torsional modes using V-g methods. The sharp edge gust system model is established and the system state equations are derived with Nw bending modes and Na torsional modes wing systems based on the function Kussner. The aeroelastic response of system shows that the amplitude oscillation becomes higher. The modeling method may offer reference for research of gust response.

  4. Low-speed aerodynamic performance of a high-aspect-ratio supercritical-wing transport model equipped with full-span slat and part-span double-slotted flaps

    Science.gov (United States)

    Morgan, H. L., Jr.; Paulson, J. W., Jr.

    1979-01-01

    An investigation was conducted in the Langley V/STOL tunnel to determine the static longitudinal and lateral-directional aerodynamic characteristics of an advanced high-aspect-ratio supercritical-wing transport model equipped with a full-span leading-edge slat and part-span double-slotted trailing-edge flaps. This wide-body transport model was also equipped with spoiler and aileron control surfaces, flow-through nacelles, landing gear, movable horizontal tails, and interchangeable wing tips with aspect ratios of 10 and 12. The model was tested with leading-edge slat and trailing-edge flap combinations representative of cruise, climb, takeoff, and landing wing configurations. The tests were conducted at free-stream conditions corresponding to Reynolds numbers (based on mean geometric chord) of 0.97 to 1.63 x 10 to the 6th power and corresponding Mach numbers of 0.12 to 0.20, through an angle-of-attack range of -2 deg to 24 deg and a sideslip-angle range of -10 deg to 5 deg.

  5. Oblique patterned etching of vertical silicon sidewalls

    Science.gov (United States)

    Bruce Burckel, D.; Finnegan, Patrick S.; David Henry, M.; Resnick, Paul J.; Jarecki, Robert L.

    2016-04-01

    A method for patterning on vertical silicon surfaces in high aspect ratio silicon topography is presented. A Faraday cage is used to direct energetic reactive ions obliquely through a patterned suspended membrane positioned over the topography. The technique is capable of forming high-fidelity pattern (100 nm) features, adding an additional fabrication capability to standard top-down fabrication approaches.

  6. Micro-column enhanced boiling structure and its ramification

    Institute of Scientific and Technical Information of China (English)

    汤勇; 陆龙生; 袁冬; 苏达士

    2008-01-01

    Enhanced boiling experiments of two different enhanced structures were carried out in a thermosyphon loop evaporator chamber. One was micro-columns array structure (MCAS), which was fabricated on copper plate surface with interaction high speed wire electrode discharge machining (HS-WEDM). The other was the ramification of MCAS, named micro-column-array and sintered-copper compound structure (MSCS), which was fabricated with sintered method on micro-column array structure. Considering the wall superheat and critical heat flux (CHF), comparisons were made between them. The results show that both MCAS and MSCS can enhance the boiling heat transfer. It is also found that the enhanced boiling heat transfer ability of MSCS is changed obviously while the porosity of the sintered copper layer is changed.

  7. 高深宽比金属光栅制备及中红外波段传感特性%Fabrication and application of high aspect ratio metallic gratings for sensing in the mid-infrared region

    Institute of Scientific and Technical Information of China (English)

    郑改革; 陈云云; 徐林华; 赖敏

    2013-01-01

    A method for fabricating high aspect ratio (HAR) metallic gratings using nanoimprint together with sputtering and reactive-ion etching (RIE) was introduced. The reflection spectrum is measured by Fourier transform infrared (FT-IR) spectrometer in the mid-infrared (Mid-IR) region. The reflection peaks will appear just when the p-polarized light incident normally to the grating vector direction, which is very similar to the phenomenon of surface plasmon resonance. This is the so-called spoof surface plasmon resonance (SSPR). Theoretical analysis based on rigorous coupled wave showed that spoof surface plasmon resonance is very sensitive to the change of refractive index in the surface of the metal. Thus this phenomenon has its potential use as a refractive index sensor. In addition, the shift of resonance wavelength with the refractive index of the metal surface is completely linear. The refractive index sensitivity of the Mid-IR SPR sensor are predicted to be 1600 nm per refractive index unit (1600 nm/RIU) and 5000 nm/RIU for the positive and negative order diffractive waves, respectively. The corresponding figure of merits of the whole system is predicted to be 20 RIU -1 and 60 RIU-1, respectively. The list of applicable target materials will certainly expand greatly if mid-IR SPR-based sensors are developed.%利用纳米压印结合溅射和反应离子刻蚀工艺制备了具有高深宽比的金光栅,使用傅里叶变换红外光谱仪测得了反射谱线.测量结果显示,只在p偏振光垂直于光栅矢量方向入射条件下才存在共振反射峰,证明了“伪表面等离子体激元波”的存在.基于严格耦合波分析理论计算了金属光栅的反射率,研究了其作为中红外波段波长调制型表面等离子体共振传感器的可行性.数值计算表明负级次衍射光波对应的共振反射峰的移动能获得较高的波长灵敏度.对于深宽比为10的金光栅结构,+1级次和-3级次衍射光波对应

  8. Preparation and Cytotoxicity of High-aspect-ratio Gold Nanorods at Single Cell Level%大长径比金纳米棒的合成及其单细胞毒性研究

    Institute of Scientific and Technical Information of China (English)

    周海英; 周瑞; 熊斌; 何彦

    2012-01-01

    利用三步晶种生长法合成长径比约为14的大长径比金纳米棒(GNR),利用巯基十一酸(MUDA)对金纳米棒表面进行了生物适应性修饰,并在宏观水平上研究了修饰前后的金纳米棒在对细胞活性的影响.利用单细胞方法分别考察了修饰后的纳米金棒对细胞贴壁过程、增殖速率、细胞内ROS以及骨架排布的影响.虽然MTT细胞活性结果显示内吞后的金纳米棒对细胞无毒,但单细胞毒性分析方法发现,不同浓度纳米金棒对早期贴壁过程有较小的影响,且内吞的纳米金棒在一定程度上促进了细胞的增殖,而高浓度下纳米金棒引起了细胞内ROS含量的升高,并破坏了细胞内骨架纤维排布.本研究建立了用单细胞行为分析纳米颗粒对细胞毒性的方法,证明了以往仅仅利用MTT等宏观手段分析纳米材料生物适应性是不足的.纳米材料在生物医学领域的进一步应用还应考虑单细胞及分子水平上的毒性效应.%We have synthesized high-aspect-ratio gold nanorods (GNR) by using a three-step seed-mediated growth method. The aspect ratio of the GNRs is approximately 14. The modification of the GNRs was achieved by replacing the CTAB molecules on the surface of gold nanorods with the 11-mercaptoundecanoic (MUDA) molecules. The cytotoxicity of the as-prepared GNRs and their effects on endocytosis, adhesion, proliferation, intracellular reactive oxygen species (ROS) level and cytoskeleton of the cells were studied. Interestingly, by using the 3-(4, 5-dimethylthiazol-2-yl) 2,5-diphenyl-tetrazolium bromide (MTT) assay, the GNRs did not show a significant toxicity to HeLa cells. However, single cell viability assays showed that GNR uptake could influence the cell adhesion at the early stage, though the effect was not much, and the cell proliferation was promoted to some degree. Moreover, large amounts of GNR uptake will lead to increased intracellular ROS level and impaired the cell skeleton.

  9. Design and realisation of a quasi monolithic silicon load cell

    NARCIS (Netherlands)

    Wensink, H.; Wiegerink, R.J.; Zwijze, A.F.; Boer, de M.J.; Elwenspoek, M.C.

    1998-01-01

    In this paper, the first silicon load cell is presented designed for measuring a load up to 1000 kg. A prototype has been realised. An improved cryogenic RIE process with high aspect ratio was developed for the fabrication of thin springs. Low temperature silicon direct bonding was used for the fina

  10. Silicon germanium mask for deep silicon etching

    KAUST Repository

    Serry, Mohamed

    2014-07-29

    Polycrystalline silicon germanium (SiGe) can offer excellent etch selectivity to silicon during cryogenic deep reactive ion etching in an SF.sub.6/O.sub.2 plasma. Etch selectivity of over 800:1 (Si:SiGe) may be achieved at etch temperatures from -80 degrees Celsius to -140 degrees Celsius. High aspect ratio structures with high resolution may be patterned into Si substrates using SiGe as a hard mask layer for construction of microelectromechanical systems (MEMS) devices and semiconductor devices.

  11. Deep anisotropic dry etching of silicon microstructures by high-density plasmas

    NARCIS (Netherlands)

    Blauw, M.A.

    2004-01-01

    This thesis deals with the dry etching of deep anisotropic microstructures in monocrystalline silicon by high-density plasmas. High aspect ratio trenches are necessary in the fabrication of sensitive inertial devices such as accellerometers and gyroscopes. The etching of silicon in fluorine-based

  12. MEMS acoustic emission transducers designed with high aspect ratio geometry

    Science.gov (United States)

    Saboonchi, H.; Ozevin, D.

    2013-09-01

    In this paper, micro-electro-mechanic systems (MEMS) acoustic emission (AE) transducers are manufactured using an electroplating technique. The transducers use a capacitance change as their transduction principle, and are tuned to the range 50-200 kHz. Through the electroplating technique, a thick metal layer (20 μm nickel + 0.5 μm gold) is used to form a freely moving microstructure layer. The presence of the gold layer reduces the potential corrosion of the nickel layer. A dielectric layer is deposited between the two electrodes, thus preventing the stiction phenomenon. The transducers have a measured quality factor in the range 15-30 at atmospheric pressure and are functional without vacuum packaging. The transducers are characterized using electrical and mechanical tests to identify the capacitance, resonance frequency and damping. Ultrasonic wave generation using a Q-switched laser shows the directivity of the transducer sensitivity. The comparison of the MEMS transducers with similar frequency piezoelectric transducers shows that the MEMS AE transducers have better response characteristics and sensitivity at the resonance frequency and well-defined waveform signatures (rise time and decay time) due to pure resonance behavior in the out-of-plane direction. The transducers are sensitive to a unique wave direction, which can be utilized to increase the accuracy of source localization by selecting the correct wave velocity at the structures.

  13. Rapid homogeneous endothelialization of high aspect ratio microvascular networks.

    Science.gov (United States)

    Naik, Nisarga; Hanjaya-Putra, Donny; Haller, Carolyn A; Allen, Mark G; Chaikof, Elliot L

    2015-08-01

    Microvascularization of an engineered tissue construct is necessary to ensure the nourishment and viability of the hosted cells. Microvascular constructs can be created by seeding the luminal surfaces of microfluidic channel arrays with endothelial cells. However, in a conventional flow-based system, the uniformity of endothelialization of such an engineered microvascular network is constrained by mass transfer of the cells through high length-to-diameter (L/D) aspect ratio microchannels. Moreover, given the inherent limitations of the initial seeding process to generate a uniform cell coating, the large surface-area-to-volume ratio of microfluidic systems demands long culture periods for the formation of confluent cellular microconduits. In this report, we describe the design of polydimethylsiloxane (PDMS) and poly(glycerol sebacate) (PGS) microvascular constructs with reentrant microchannels that facilitates rapid, spatially homogeneous endothelial cell seeding of a high L/D (2 cm/35 μm; > 550:1) aspect ratio microchannels. MEMS technology was employed for the fabrication of a monolithic, elastomeric, reentrant microvascular construct. Isotropic etching and PDMS micromolding yielded a near-cylindrical microvascular channel array. A 'stretch - seed - seal' operation was implemented for uniform incorporation of endothelial cells along the entire microvascular area of the construct yielding endothelialized microvascular networks in less than 24 h. The feasibility of this endothelialization strategy and the uniformity of cellularization were established using confocal microscope imaging.

  14. Downsizing of single crystalline high aspect ratio tungsten nanowires

    Energy Technology Data Exchange (ETDEWEB)

    Milenkovic, Srdjan [IMDEA Materials Institute, Eric Kandel 2, 28906, Getafe (Spain); Drensler, Stefanie [Institute for Chemical Technology of Inorganic Materials, Johannes Kepler University, Altenberger Str. 69, 4040, Linz (Austria); Hassel, Achim Walter [Institute for Chemical Technology of Inorganic Materials, Johannes Kepler University, Altenberger Str. 69, 4040, Linz (Austria); Christian Doppler Laboratory for Combinatorial Oxide Chemistry, Institute for Chemical Technology of Inorganic Materials, Johannes Kepler University Linz, Altenberger Str. 69, 4040, Linz (Austria)

    2015-06-15

    Directional solidification of eutectic NiAl-W alloys offers an intuitive method to produce tungsten nanowires. Through the use of two different methods, the well-established Bridgman method and a newer type floating zone method, the direct influence of process parameters, like the withdrawal rate and the temperature gradient, onto the sample microstructure were studied. The sharp temperature gradient, built up using a four mirror system focusing the light emitted by halogen lamps inside the optical floating zone furnace allows producing nanowires with a diameter as small as 75 nm. Differences in the solid/liquid interface morphology depending on the solidification method used are discussed. (copyright 2015 WILEY-VCH Verlag GmbH and Co. KGaA, Weinheim)

  15. Active Aeroelastic Tailoring of High-Aspect-Ratio Composite Wings

    Science.gov (United States)

    2005-09-01

    34 - 26000 , ......... . . . ...... . . .... .. .......................... ... - - ----------- 21000 ... ........... ~0 50 LOAD... ISO 5: B s mission....f Figure 5: Basic mission profile 7 Figure 6: Baseline single-wing and joined-wing vehicles 3.1 Baseline vehicles Three sets

  16. Photoimageable Polyimide: A Dielectric Material For High Aspect Ratio Structures

    Science.gov (United States)

    Cech, Jay M.; Oprysko, Modest M.; Young, Peter L.; Li, Kin

    1986-07-01

    Polyimide has been identified as a useful material for microelectronic packaging because of its low dielectric constant and high temperature stability. Difficulties involved with reactive ion etching (RIE), a conventional technique for patterning thick polyimide films (thickness greater than 5 microns) with vertical walls, can be overcome by using photimageable polyimide precursors. The processing steps are similar to those used with negative photoresists. EM Chemical's HTR-3 photosensitive polyimide has been spun on up to a thickness of 12 microns. Exposure with a dose of 780 mJcm-2 of ultraviolet light, followed by spin development produces clean patterns as small as 5 microns corresponding to an aspect ratio of 2.4. When the patterned precursor is heated, an imidization reaction occurs converting the patterned film to polyimide. Baking to ca. 400 degrees C results in substantial loss in the thickness and in line width. However, shrinkage occurs reproducibly so useful rules for mask design can be formulated. Near vertical wall structures can be fabricated by taking advantage of the optical and shrinkage properties of the polyimide precursor. After development, an undercut wall profile can be produced since the bottom of the film receives less exposure and is hence more soluble in the developer. During heating, lateral shrinkage pulls the top of the film inward producing a vertical wall since the bottom is fixed to the substrate by adhesion. As a result, fully cured polyimide structures with straight walls and aspect ratios greater than one can be obtained. Dielectric properties of the fully imidized films were investigated with capacitor test structures. A relative dielectric constant of 3.3 and a loss tangent of .002 were measured at 20 kHz. It was also found that the dielectric constant increases as a linear function of relative humidity.

  17. High aspect ratio template and method for producing same

    Science.gov (United States)

    Sakamoto, Jeff S. (Inventor); Weiss, James R. (Inventor); Fleurial, Jean-Pierre (Inventor); Kisor, Adam (Inventor); Tuszynski, Mark (Inventor); Stokols, Shula (Inventor); Holt, Todd Edward (Inventor); Welker, David James (Inventor); Breckon, Christopher David (Inventor)

    2010-01-01

    Millimeter to nano-scale structures manufactured using a multi-component polymer fiber matrix are disclosed. The use of dissimilar polymers allows the selective dissolution of the polymers at various stages of the manufacturing process. In one application, biocompatible matrixes may be formed with long pore length and small pore size. The manufacturing process begins with a first polymer fiber arranged in a matrix formed by a second polymer fiber. End caps may be attached to provide structural support and the polymer fiber matrix selectively dissolved away leaving only the long polymer fibers. These may be exposed to another product, such as a biocompatible gel to form a biocompatible matrix. The polymer fibers may then be selectively dissolved leaving only a biocompatible gel scaffold with the pores formed by the dissolved polymer fibers.

  18. Noise Measurements of High Aspect Ratio Distributed Exhaust Systems

    Science.gov (United States)

    Bridges, James E.

    2015-01-01

    This paper covers far-field acoustic measurements of a family of rectangular nozzles with aspect ratio 8, in the high subsonic flow regime. Several variations of nozzle geometry, commonly found in embedded exhaust systems, are explored, including bevels, slants, single broad chevrons and notches, and internal septae. Far-field acoustic results, presented previously for the simple rectangular nozzle, showed that increasing aspect ratio increases the high frequency noise, especially directed in the plane containing the minor axis of the nozzle. Detailed changes to the nozzle geometry generally made little difference in the noise, and the differences were greatest at low speed. Having an extended lip on one broad side (bevel) did produce up to 3 decibels more noise in all directions, while extending the lip on the narrow side (slant) produced up to 2 decibels more noise, primarily on the side with the extension. Adding a single, non-intrusive chevron, made no significant change to the noise, while inverting the chevron (notch) produced up to 2decibels increase in the noise. Having internal walls (septae) within the nozzle, such as would be required for structural support or when multiple fan ducts are aggregated, reduced the noise of the rectangular jet, but could produce a highly directional shedding tone from the septae trailing edges. Finally, a nozzle with both septae and a beveled nozzle, representative of the exhaust system envisioned for a distributed electric propulsion aircraft with a common rectangular duct, produced almost as much noise as the beveled nozzle, with the septae not contributing much reduction in noise.

  19. Metallization of high aspect ratio, out of plane structures

    DEFF Research Database (Denmark)

    Vazquez, Patricia; Dimaki, Maria; Svendsen, Winnie Edith

    2009-01-01

    This work is dedicated to developing a novel three dimensional structure for electrochemical measurements in neuronal studies. The final prototype will allow not only for the study and culture on chip of neuronal cells, but also of brain tissue. The use of out-of-plane electrodes instead of planar......, since the coverage of the side walls of almost vertical pillars is not trivial by standard processes in a clean room facility. This paper will discuss the different steps taken towards this goal and present the results that we have obtained so far....

  20. Stress response of Caenorhabditis elegans induced by space crowding in a micro-column array chip.

    Science.gov (United States)

    Wang, Xixian; Tang, Lichun; Xia, Yuyang; Hu, Liang; Feng, Xiaojun; Du, Wei; Liu, Bi-Feng

    2013-04-01

    Crowding stress has been reported to play an important role in affecting physiological behaviour. To study this process, a reliable analytical method under confined space is essential. In this work, we demonstrated a microfluidic approach for investigating physiological responses of C. elegans to confined spaces. The PDMS microfluidic chip consisting of arrays of micro-columns enabled us to mimic different crowding conditions by changing the intervals among micro-columns. C. elegans were transferred into this micro-column array and the subcellular distribution of DAF-16, which is a well-known transcription factor regulating different stress responses, was monitored for analysing the physiological responses to the confined spaces. We found that the worms exhibited a gradual increase in DAF-16 nuclear localization in the micro-column array with intervals from 200 μm to 40 μm. Moreover, the results showed that the absence of food and crowding stress could cooperate to promote increased DAF-16 nuclear localization. Finally, loss-of-function mutations in mec-4 and mec-10, which are amiloride-sensitive Na(+) channel genes expressed in all six gentle touch neurons, accelerated the velocity of DAF-16 nuclear localization, induced by confined space, revealing that mec-4/mec-10 were not required for this stress response. Thus, this device will provide a versatile, reliable and controllable platform for crowding stress studies.

  1. Preliminary Study of Polymer Removal in 0.25, 0.3, and 0.5 μm Ruthenium Storage Nodes and 0.11 μm, 10.9:1 High-Aspect-Ratio Trenches by Laser-Induced Etching

    Science.gov (United States)

    Kim, Yong-Gi; Cha, Byung Heon

    2005-07-01

    The demands for new etching technology are increasing because of new materials, such as, ruthenium (Ru), platinum (Pt), and iridium (Ir), that are now being used, and the strict critical dimension (C/D) controls required in today’s ultra large scale integrated (ULSI) circuit technology and dynamic random-access memory (DRAM) fabrication lines. Laser etching technology successfully etched organometallic polymers generated after reactive ion etching and ash processing in 0.25, 0.3, and 0.5 μm Ru storage nodes. In this study, the effects of the incident beam profile on the laser-induced etching of the polymers are investigated. Unevenness of the peak energy in the Gaussian beam profile creates unequal etching and heating effects on the polymer removal depending on the irradiating position of the line beam profile on the sample surface. This article discusses for the first time the preliminary results of laser-induced etching with a KrF laser to remove photoresist (PR) and polymer in 0.11 μm deep contact holes with a high-aspect-ratio 10.9:1 trench hole. How deep can the laser etching technology penetrate and strip the PR at a high aspect ratio (A/R) of 10.9:1 and a 0.11 μm hole size? The penetration depth for the PR removal was approximately 1 μm, which is about a 9.1:1 A/R in a 0.11 μm hole with a 1.2-μm-deep trench. Several promising points are discussed on the basis of laser etching in such a high A/R and small 0.11 μm contact hole. Laser-induced etching technology enabled a very uniform penetration depth without any fluctuations, and it also did not show any attack on the edge of the barrier material TiN.

  2. The black silicon method: A universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control

    NARCIS (Netherlands)

    Jansen, Henricus V.; de Boer, Meint J.; Legtenberg, R.; Legtenberg, Rob; Elwenspoek, Michael Curt

    Very deep trenches (up to 200 μm) with high aspect ratios (up to 10) in silicon and polymers are etched using a fluorine-based plasma (SF6/O2/CHF3). Isotropic, positively and negatively (i.e. reverse) tapered as well as fully vertical walls with smooth surfaces are achieved by controlling the plasma

  3. The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control

    NARCIS (Netherlands)

    Jansen, Henricus V.; Legtenberg, R.; de Boer, Meint J.; Legtenberg, Rob; Elwenspoek, Michael Curt

    1994-01-01

    Very deep treches (up to 200 um) with high aspect ratios (up to 10) in silicon are etched using a fluorine-based plasma (SF6/O2/CHF3). Isotropic, positively and megatively (i.e. reverse) tapered as well as fully vertical walls with smooth surfaces are achieved by controlling the plasma chemistry. A

  4. Translation and manipulation of silicon nanomembranes using holographic optical tweezers

    Directory of Open Access Journals (Sweden)

    Oehrlein Stefan

    2011-01-01

    Full Text Available Abstract We demonstrate the use of holographic optical tweezers for trapping and manipulating silicon nanomembranes. These macroscopic free-standing sheets of single-crystalline silicon are attractive for use in next-generation flexible electronics. We achieve three-dimensional control by attaching a functionalized silica bead to the silicon surface, enabling non-contact trapping and manipulation of planar structures with high aspect ratios (high lateral size to thickness. Using as few as one trap and trapping powers as low as several hundred milliwatts, silicon nanomembranes can be rotated and translated in a solution over large distances.

  5. Characterization of adsorption of aqueous arsenite and arsenate onto charred dolomite in microcolumn systems.

    Science.gov (United States)

    Salameh, Yousef; Al-Muhtaseb, Ala'a H; Mousa, Hasan; Walker, Gavin M; Ahmad, Mohammad N M

    2014-01-01

    In this work, the removal of arsenite, As(III), and arsenate, As(V), from aqueous solutions onto thermally processed dolomite (charred dolomite) via microcolumn was evaluated. The effects of mass of adsorbent (0.5-2 g), initial arsenic concentration (50-2000 ppb) and particle size (dolomite in a microcolumn were investigated. It was found that the adsorption of As(V) and As(III) onto charred dolomite exhibited a characteristic 'S' shape. The adsorption capacity increased as the initial arsenic concentration increased. A slow decrease in the column adsorption capacity was noted as the particle size increased from>0.335 to 0.710-2.00 mm. For the binary system, the experimental data show that the adsorption of As(V) and As(III) was independent of both ions in solution. The experimental data obtained from the adsorption process were successfully correlated with the Thomas Model and Bed Depth Service Time Model.

  6. Solid-phase microcolumn extraction and gas chromatography-mass spectrometry identification of volatile organic compounds emitted by paper.

    Science.gov (United States)

    Hrivnák, Ján; Tölgyessy, Peter; Figedyová, Sona; Katuscák, Svetozár

    2009-11-15

    A rapid non-destructive sampling technique for the analysis of volatile organic compounds (VOCs) emitted by paper sheets is described. A capillary, which is connected to a microcolumn packed with Tenax TA, is inserted between two sheets at the centre of a paper stack encapsulated inside a PET/Al/PE composite foil. The other end of the microcolumn is connected to a gas-tight syringe and an appropriate volume of gaseous phase is aspirated. The microcolumn is then thermally desorbed in a modified GC inlet (modification is presented) and analysed by gas chromatography-mass spectrometry (GC-MS). In the chromatogram from the analysis of artificially aged paper sample 21 compounds were identified. Advantages of the method including the short sampling time (1 min), simplicity and economic aspect are discussed.

  7. Q Sepharose micro-column chromatography: A simple screening method for identifying beta thalassemia traits and hemoglobin E carriers.

    Science.gov (United States)

    Wong, Peerapon; Sritippayawan, Suchila; Suwannakhon, Narutchala; Tapprom, Akamon; Deoisares, Rawisut; Sanguansermsri, Torpong

    2016-11-01

    For beta thalassemia control program in pregnancy, mass screening of the carrier state by determination of the hemoglobin (Hb) A2 and Hb E proportions and mutation analysis is a preferred method for making prenatal diagnoses. Q Sepharose micro-column chromatography, developed for the determination of Hb A2 and Hb E for screening purposes, was compared with high performance liquid chromatography (HPLC) to ascertain its relative accuracy and reliability. Results using Q Sepharose micro-column chromatography in 350 blood specimens, including 50 samples genetically proven to be beta thalassemia heterozygotes, were compared to HPLC for validation. An additional study was conducted to test a clinical application on a large-scale survey for beta thalassemia in 1581 pregnant women and their spouses. The mean (±SD) Hb A2 proportions in the normal and genetically proven beta thalassemia heterozygotes were 2.70±0.40% and 6.30±1.23%, respectively, as determined by Q-Sepharose micro-column chromatography, and 2.65±0.31% and 5.37±0.96%, respectively, as determined by HPLC. The mean Hb E proportions in the Hb E heterozygotes were 23.25±4.13% and 24.72±3.5% as determined by Q Sepharose micro-column chromatography and HPLC, respectively. In the large-scale survey for beta thalassemia, 23 at risk couples were detected. Seven affected fetuses were identified by prenatal diagnosis. Q Sepharose micro-column chromatography was found to be reliable, reproducible and well-suited for large-scale surveys. Additionally, by being reusable and convenient, this simple and economical chromatography method may be an alternative means to screen for beta thalassemia and Hb E carriers in the mass population. Copyright © 2016 The Canadian Society of Clinical Chemists. Published by Elsevier Inc. All rights reserved.

  8. The use of titanium dioxide micro-columns to selectively isolate phosphopeptides from proteolytic digests

    DEFF Research Database (Denmark)

    Thingholm, Tine E; Larsen, Martin R

    2009-01-01

    Titanium dioxide has very high affinity for phosphopeptides and it has become an efficient alternative to already existing methods for phosphopeptide enrichment from complex samples. Peptide loading in a highly acidic environment in the presence of 2,5-dihydroxybenzoic acid (DHB), phthalic acid......, or glycolic acid has been shown to improve selectivity significantly by reducing unspecific binding from nonphosphorylated peptides. The enriched phosphopeptides bound to the titanium dioxide are subsequently eluted from the micro-column using an alkaline buffer. Titanium dioxide chromatography is extremely...... tolerant towards most buffers used in biological experiments. It is highly robust and as such it has become one of the methods of choice in large-scale phospho-proteomics. Here we describe the protocol for phosphopeptide enrichment using titanium dioxide chromatography followed by desalting...

  9. A Simple Design to Realize Micro-column Separation by Conventional Analytical HPLC

    Institute of Scientific and Technical Information of China (English)

    GONG,Wenjun; ZHANG,Junxia; ZHANG,Yuping; ZHANG,Yijun; TIAN,Mengkui; WU,Dafu

    2009-01-01

    The conventional analytical HPLC was successfully developed for micro-column separation by using a simple eluate splitting system,self-preparation of packing column and on-capillary column detector in our laboratory.Porous inlet frit in fused silica capillary was rapidly prepared by sintering stainless steel powders under 500 meshes for about 20 s.The use of such frits or metal meshes in capillary to retain C18 particles of chromatographic packing was demonstrated to be stable and specially robust with continuous packing and long chromatographic runs.Furthermore,the chromatographic behavior was detailedly evaluated by changing the flow rate and the percentage of mobile phase using the prepared capillary column.Under the optimal experimental conditions,baseline separation of the model analytes including thiourea,benzene,toluene,ethylbenzene was obtained with a high column efficiency near 70000N (plates/m) by the developed capillary-HPLC.

  10. Species-selective analysis by microcolumn multicapillary gas chromatography with inductively coupled plasma mass spectrometric detection.

    Science.gov (United States)

    Rodriguez, I; Mounicou, S; Lobiński, R; Sidelnikov, V; Patrushev, Y; Yamanaka, M

    1999-10-15

    A glass rod (5-20 cm long, 2 mm o.d.) containing more than 1200 parallel microchannels ( 100 theoretical plates cm-1) GC column by coating the inside of each channel in a way that compensated for the dispersion of the channel inner diameter. The columns were evaluated for the separation of mixtures of several organometallic (Hg, Sn, Pb) compounds prior to on-line sensitive metalselective detection by ICPMS. Chromatographic separation conditions were optimized to enable a rapid (within a maximum 30 s) multielemental speciation analysis. Absolute detection limits were 0.1 pg for Hg, 0.05 pg for Sn, and 0.03 pg for Pb using the carrier gas flows of approximately 200 mL min-1. The microcolumn multicapillary GC/ICPMS developed was applied to the analysis of a number of environmental samples. The results were validated with certified reference materials for tin (BCR477, PACS-2) and mercury (DORM-1, TORT-1).

  11. Utilization of activated carbon for the removal of basic dyes in fixed-bed microcolumn

    Energy Technology Data Exchange (ETDEWEB)

    El Qada, Emad N. [Department of Chemical Engineering Technology, Yanbu Industrial College, Yanbu, P.O. Box 30346 (Saudi Arabia); Abdelghany, Emad A.; Magdy, Yehia H. [Chemical Eng. Dept., Faculty of Eng., Minia University, Minia, P.O. Box 61519 (Egypt)

    2013-07-01

    Liquid-phase adsorption processes were performed using basic dyes (methylene blue (MB), basic red (BR) and basic yellow (BY)) in an activated carbon microcolumn. The effects of initial dye concentration, column diameter and particle size were investigated. The performance of the fixed-bed adsorber was evaluated through the concept of breakthrough curves. The Thomas model was employed to predict the breakthrough curves and compared with the experimental breakthrough curves. Furthermore, the Empty Bed Residence Time (EBRT) has been applied to the data to determine the minimum residence time and the minimum adsorbent exhaustion rate. Column studies showed effective use of adsorbents. The results reflected the significance of the experimental parameters on the efficient removal of basic dyes from aqueous solution. The Thomas model predicts the experimental data well.

  12. Determination of phenylenediamine isomers in hair dyes by coal cinders micro-column extraction and MEKC.

    Science.gov (United States)

    Wu, Yiwei; Jiang, Feng; Chen, Lin; Zheng, Jing; Deng, Zhenli; Tao, Qing; Zhang, Jing; Han, Lijuan; Wei, Xiaoshu; Yu, Aimin; Zhang, Haili

    2011-06-01

    A new micellar electrokinetic chromatography (MEKC) method using beta-cyclodextrins (β-CDs) and 1-butyl-3-methylimidazolium hexafluorophosphates (ionic liquids) as additives was successfully developed for determination of para-, meta-, and ortho-phenylenediamines isomers (p-P, m-P, and o-P) in hair dyes. To improve the sensitivity of the MEKC-UV, a simple and cheap flow injection (FI) technique using a micro-column packed with coal cinders (the by-products from combustion in a boiler) as solid-phase extractant was also investigated. In the presence of 20 mmol L(-1) phosphates at pH 5.5, addition of 12 mmol L(-1) ionic liquids and 8 mmol L(-1) β-CDs greatly improved the separation efficiency. The three analytes could be quantitatively adsorbed by coal cinders, and desorbed readily with 0.15 mL of 0.01 mol L(-1) NaOH. Under the optimum conditions, an enrichment factor (EF) of 33.3 was obtained, and determination limits of p-P, m-P, and o-P were 1.97 × 10(-7), 0.99 × 10(-7), and 0.61 × 10(-7) mol L(-1), respectively. The adsorption capacities of the coal cinders micro-column for p-P, m-P, and o-P were all 1.20 mg g(-1). The presented procedure was successfully applied to the determination of p-P, m-P, and o-P in hair dyes with satisfactory results.

  13. Analysis of drug-protein binding using on-line immunoextraction and high-performance affinity microcolumns: Studies with normal and glycated human serum albumin.

    Science.gov (United States)

    Matsuda, Ryan; Jobe, Donald; Beyersdorf, Jared; Hage, David S

    2015-10-16

    A method combining on-line immunoextraction microcolumns with high-performance affinity chromatography (HPAC) was developed and tested for use in examining drug-protein interactions with normal or modified proteins. Normal human serum albumin (HSA) and glycated HSA were used as model proteins for this work. High-performance immunoextraction microcolumns with sizes of 1.0-2.0 cm × 2.1mm i.d. and containing anti-HSA polyclonal antibodies were developed and tested for their ability to bind normal HSA or glycated HSA. These microcolumns were able to extract up to 82-93% for either type of protein at 0.05-0.10 mL/min and had a binding capacity of 0.34-0.42 nmol HSA for a 1.0 cm × 2.1mm i.d. microcolumn. The immunoextraction microcolumns and their adsorbed proteins were tested for use in various approaches for drug binding studies. Frontal analysis was used with the adsorbed HSA/glycated HSA to measure the overall affinities of these proteins for the drugs warfarin and gliclazide, giving comparable values to those obtained previously using similar protein preparations that had been covalently immobilized within HPAC columns. Zonal elution competition studies with gliclazide were next performed to examine the specific interactions of this drug at Sudlow sites I and II of the adsorbed proteins. These results were also comparable to those noted in prior work with covalently immobilized samples of normal HSA or glycated HSA. These experiments indicated that drug-protein binding studies can be carried out by using on-line immunoextraction microcolumns with HPAC. The same method could be used in the future with clinical samples and other drugs or proteins of interest in pharmaceutical studies or biomedical research.

  14. Topological evolution of self-induced silicon nanogratings during prolonged femtosecond laser irradiation

    Energy Technology Data Exchange (ETDEWEB)

    Golosov, E.V.; Kolobov, Y.R. [Belgorod State University, Belgorod (Russian Federation); Ionin, A.A.; Kudryashov, S.I.; Novoselov, Y.N.; Seleznev, L.V.; Sinitsyn, D.V. [Russian Academy of Sciences, P.N. Lebedev Physical Institute, Moscow (Russian Federation); Ligachev, A.E. [A.M. Prokhorov General Physics Institute, Moscow (Russian Federation); Makarov, S.V. [Russian Academy of Sciences, P.N. Lebedev Physical Institute, Moscow (Russian Federation); National Research Nuclear University, MEPHI, Moscow (Russian Federation)

    2011-08-15

    Gradual evolution of self-induced silicon surface topology from one-dimensional ridge-like to two-dimensional spike-like nanogratings and then to isotropic sets of micro-columns was observed by evenly increasing IR and UV femtosecond laser irradiation dose. This topological evolution exhibits clear indications of consequent melting and vaporization processes being set up during the prolonged laser irradiation. Monotonously decreasing cumulative IR and UV femtosecond laser-nanostructuring thresholds may indicate an increase of optical absorbance of the laser-nanostructured silicon surfaces versus the increasing laser dose, consistent with the consequent onset of the abovementioned thermal modification processes. (orig.)

  15. Silicon nanowire photodetectors made by metal-assisted chemical etching

    Science.gov (United States)

    Xu, Ying; Ni, Chuan; Sarangan, Andrew

    2016-09-01

    Silicon nanowires have unique optical effects, and have potential applications in photodetectors. They can exhibit simple optical effects such as anti-reflection, but can also produce quantum confined effects. In this work, we have fabricated silicon photodetectors, and then post-processed them by etching nanowires on the incident surface. These nanowires were produced by a wet-chemical etching process known as the metal-assisted-chemical etching, abbreviated as MACE. N-type silicon substrates were doped by thermal diffusion from a solid ceramic source, followed by etching, patterning and contact metallization. The detectors were first tested for functionality and optical performance. The nanowires were then made by depositing an ultra-thin film of gold below its percolation thickness to produce an interconnected porous film. This was then used as a template to etch high aspect ratio nanowires into the face of the detectors with a HF:H2O2 mixture.

  16. Fabrication of single-crystal silicon nanotubes with sub-10 nm walls using cryogenic inductively coupled plasma reactive ion etching.

    Science.gov (United States)

    Li, Zhiqin; Chen, Yiqin; Zhu, Xupeng; Zheng, Mengjie; Dong, Fengliang; Chen, Peipei; Xu, Lihua; Chu, Weiguo; Duan, Huigao

    2016-09-09

    Single-crystal silicon nanostructures have attracted much attention in recent years due in part to their unique optical properties. In this work, we demonstrate direct fabrication of single-crystal silicon nanotubes with sub-10 nm walls which show low reflectivity. The fabrication was based on a cryogenic inductively coupled plasma reactive ion etching process using high-resolution hydrogen silsesquioxane nanostructures as the hard mask. Two main etching parameters including substrate low-frequency power and SF6/O2 flow rate ratio were investigated to determine the etching mechanism in the process. With optimized etching parameters, high-aspect-ratio silicon nanotubes with smooth and vertical sub-10 nm walls were fabricated. Compared to commonly-used antireflection silicon nanopillars with the same feature size, the densely packed silicon nanotubes possessed a lower reflectivity, implying possible potential applications of silicon nanotubes in photovoltaics.

  17. An Automated High Aspect Ratio Mesher for Computational Fluid Dynamics Project

    Data.gov (United States)

    National Aeronautics and Space Administration — The work will focus on the 3D implementation of the Phase 1 CHARM mesher, with solution-adaptive iteration for CFD and non-CFD applications. The proposed 3D method...

  18. The flow over a 'high' aspect ratio gothic wing at supersonic speeds

    Science.gov (United States)

    Narayan, K. Y.

    1975-01-01

    Results are presented of an experimental investigation on a nonconical wing which supports an attached shock wave over a region of the leading edge near the vertex and a detached shock elsewhere. The shock detachment point is determined from planform schlieren photographs of the flow field and discrepancies are shown to exist between this and the one calculated by applying the oblique shock equations normal to the leading edge. On a physical basis, it is argued that the shock detachment has to obey the two-dimensional law normal to the leading edges. From this, and from other measurements on conical wings, it is thought that the planform schlieren technique may not be particularly satisfactory for detecting shock detachment. Surface pressure distributions are presented and are explained in terms of the flow over related delta wings which are identified as a vertex delta wing and a local delta wing.

  19. Visualization of cavitating and flashing flows within a high aspect ratio injector

    Science.gov (United States)

    Thompson, Andrew S.

    Thermal management issues necessitate the use of fuel as a heat sink for gas turbine and liquid rocket engines. There are certain benefits to using heated fuels, namely, increased sensible enthalpy, increased combustion efficiency, a decrease in certain emissions, and enhanced vaporization characteristics. However, the thermal and pressure enviornment inside an injector can result in the fuel flashing to vapor. Depending on the injector design, this can have deleterious effects on engine performance. As interest in heated fuels inreases, it is important to understand what occurs in the flow path of an injector under flashing conditions. At the High Pressure Laboratory at Purdue University's Maurice J. Zucrow Laboritories, a test rig was designed and built to give visual access into the flow path of a 2-D slot injector. The rig is capable of pressurizing and heating a liquid to superheated conditions and utilizes a pneumatically actuated piston to pusth the liquid through the slot injector. Methanol was chosen as a surrogate fuel to allow for high levels of superheat at relatively low temperatures. Testing was completed with acrylic and quartz injectors of varying L/DH. Flashing conditions inside the injector flow path were induced via a combination of heating and back pressure adjustments. Volume flow rate, pressure measurements, and temperature measurements were made which allowed the discharge characteristics, the level of superheat, and other parameters to be calculated and compared. To give a basis for comparison the flashing results are compared to the flow through the injector under cavitating conditions. Cavitation and flashing appear to be related phenomena and this relationship is shown. Bubble formation under cavitating or flashing conditions is observed to attenuate the injector's discharge characteristics. High speed videos of the flow field were also collected. Several flow regimes and flow structures, unique to these regimes, were observed. A frequency analysis was also performed on the video files. Bubble formation in the flow field dominates the frequency spectrum, which is confined below 1 kHz. The test campaign was successful. The result is a possible way to predict an injector's performance under flashing conditions without running heated fuel through the injector. These results may be applicable to real world injector design and testing.

  20. Light extinction and scattering from individual and arrayed high-aspect-ratio trenches in metal

    DEFF Research Database (Denmark)

    Roberts, Alexander; Søndergaard, Thomas; Chirumamilla, Manohar

    2016-01-01

    for a two-dimensional scatterer. We construct a simple resonator model which predicts the wavelength-dependent extinction, scattering, and absorption cross section of the trench and compare the model findings with full numerical simulations. Both extinction and scattering cross sections are mainly...... determined by the wavelength and can reach highly supergeometric values. At wavelengths where the metal exhibits near perfect electrical conductor behavior, such trenches lend themselves to be used as self-normalizing scatterers, as their scattering cross section is independent of their geometry and depend...... and two-photon luminescence that the resonant behavior of the vertical trenches is preserved....

  1. Surface tension-induced high aspect-ratio PDMS micropillars with concave and convex lens tips

    KAUST Repository

    Li, Huawei

    2013-04-01

    This paper reports a novel method for the fabrication of 3-dimensional (3D) Polydimethylsiloxane (PDMS) micropillars with concave and convex lens tips in a one-step molding process, using a CO2 laser-machined Poly(methyl methacrylate) (PMMA) mold with through holes. The PDMS micropillars are 4 mm high and have an aspect ratio of 251. The micropillars are formed by capillary force drawing up PDMS into the through hole mold. The concave and convex lens tips of the PDMS cylindrical micropillars are induced by surface tension and are controllable by changing the surface wetting properties of the through holes in the PMMA mold. This technique eliminates the requirements of expensive and complicated facilities to prepare a 3D mold, and it provides a simple and rapid method to fabricate 3D PDMS micropillars with controllable dimensions and tip shapes. © 2013 IEEE.

  2. Nanofabrication of low extinction coefficient and high-aspect-ratio Si structures for metaphotonic applications

    Science.gov (United States)

    Lee, JeongYub; Song, Byonggwon; Kim, Jaekwan; Lee, Chang-Won; Han, Seunghoon; Baik, Chan-Wook; Jeong, Heejeong; Kim, Yongsung; Lee, Chang Seung

    2016-09-01

    We investigated forming of high refractive index (n), low extinction coefficient (k) of Si dielectrics in visible wavelength ranges. To decrease k, pulsed green laser annealing (GLA) with line beam of a 532-nm wavelength was applied in this study for homogeneous melting. By AFM, XRD and TEM analysis, we examined the defect reduction in various conditions during poly-crystallization. We achieved dielectric nanostructures having optical properties of n>4.2, k<0.06 at 550 nm wavelength and fine pitches down to 40 nm (aspect ratio 3:1) and 130 nm (aspect ratio 7:1) with +/-5% size accuracy. Finally, we realized optical metasurfaces for optical band filters, flat lens and beam deflectors.

  3. Nucleation of melting and solidification in confined high aspect ratio thin films

    Science.gov (United States)

    Mastandrea, J. P.; Ager, J. W.; Chrzan, D. C.

    2017-09-01

    Classical nucleation theory is used to consider the solidification of a melt confined between two planar surfaces. The critical nucleus shapes and the associated nucleation energy barriers are computed as a function of the thickness of the film and the film's relevant bulk and interface energies. The analysis is then repeated for the melting transition, and expressions for the depression and elevation of the melting temperature, relative to the thermodynamic bulk melting temperature of the film material, are found. A nucleus morphology diagram is constructed. This diagram presents the lowest energy morphology of the nuclei, as well as melting points, as a function of the system parameters. Using the nucleus morphology diagram, experimental and system parameters that allow for the desired nucleation behavior can be identified. Furthermore, the nucleus morphology diagram illustrates a region of parameter space where the film is predicted to solidify above its thermodynamic bulk melting temperature, a behavior termed presolidification. The theory is used to predict the temperature at which the nucleation of the solid phase and liquid phase is expected for Ge between two glass substrates. Furthermore, a possible route for controlling the orientation of the film is identified. By controlling the growth temperature, certain orientations may not be able to nucleate, thereby reducing the possible number of orientations within a film.

  4. High aspect ratio iridescent three-dimensional metal–insulator–metal capacitors using atomic layer deposition

    Energy Technology Data Exchange (ETDEWEB)

    Burke, Micheal, E-mail: micheal.burke@tyndall.ie; Blake, Alan; Djara, Vladimir; O' Connell, Dan; Povey, Ian M.; Cherkaoui, Karim; Monaghan, Scott; Scully, Jim; Murphy, Richard; Hurley, Paul K.; Pemble, Martyn E.; Quinn, Aidan J., E-mail: aidan.quinn@tyndall.ie [Tyndall National Institute, University College Cork, Cork (Ireland)

    2015-01-01

    The authors report on the structural and electrical properties of TiN/Al{sub 2}O{sub 3}/TiN metal–insulator–metal (MIM) capacitor structures in submicron three-dimensional (3D) trench geometries with an aspect ratio of ∼30. A simplified process route was employed where the three layers for the MIM stack were deposited using atomic layer deposition (ALD) in a single run at a process temperature of 250 °C. The TiN top and bottom electrodes were deposited via plasma-enhanced ALD using a tetrakis(dimethylamino)titanium precursor. 3D trench devices yielded capacitance densities of 36 fF/μm{sup 2} and quality factors >65 at low frequency (200 Hz), with low leakage current densities (<3 nA/cm{sup 2} at 1 V). These devices also show strong optical iridescence which, when combined with the covert embedded capacitance, show potential for system in package (SiP) anticounterfeiting applications.

  5. Lecithin blended polyamide-6 high aspect ratio nanofiber scaffolds via electrospinning for human osteoblast cell culture

    Energy Technology Data Exchange (ETDEWEB)

    Nirmala, R. [Bio-nano System Engineering, College of Engineering, Chonbuk National University, Jeonju, 561 756 (Korea, Republic of); Park, Hye-Min [Department of Pharmacology and Toxicology, College of Veterinary Medicine, Chonbuk National University, Jeonju 561 756 (Korea, Republic of); Navamathavan, R. [School of Advanced Materials Engineering, Chonbuk National University, Jeonju 561 756 (Korea, Republic of); Kang, Hyung-Sub [Department of Pharmacology and Toxicology, College of Veterinary Medicine, Chonbuk National University, Jeonju 561 756 (Korea, Republic of); El-Newehy, Mohamed H. [Petrochemical Research Chair, Department of Chemistry, College of Science, King Saud University, Riyadh 11451 (Saudi Arabia); Kim, Hak Yong, E-mail: khy@jbnu.ac.kr [Petrochemical Research Chair, Department of Chemistry, College of Science, King Saud University, Riyadh 11451 (Saudi Arabia); Center for Healthcare Technology and Development, Chonbuk National University, Jeonju, 561 756 (Korea, Republic of)

    2011-03-12

    In this study, we focused on the preparation and characterization of lecithin blended polyamide-6 nanofibers via an electrospinning process for human osteoblastic (HOB) cell culture applications. The morphological, structural characterizations and thermal properties of polyamide-6/lecithin nanofibers were determined by using scanning electron microscopy (SEM), field-emission scanning electron microscopy (FE-SEM), X-ray diffraction (XRD), Fourier transform infrared (FT-IR) spectroscopy, differential scanning calorimetry (DSC) and thermogravimetry (TGA). SEM images revealed that the nanofibers were well-oriented with good incorporation of lecithin. FT-IR results indicated the presence of amino groups of lecithin in the blended nanofibers. TGA analysis revealed that the onset degradation temperature decreased with increasing lecithin content in the blended nanofibers. The morphological features of cells attached on polyamide-6/lecithin nanofibers were confirmed by SEM. The adhesion, viability and proliferation properties of osteoblast cells on the polyamide-6/lecithin blended nanofibers were analyzed by in vitro cell compatibility test. This study demonstrated the non-cytotoxic behavior of electrospun polyamide-6/lecithin nanofibers for the osteoblast cell culture.

  6. Dispersion and Polarization of Surface Waves Trapped in High Aspect Ratio Electrode Arrays

    DEFF Research Database (Denmark)

    Laude, Vincent; Dühring, Maria Bayard; Moubchir, Hanane

    2007-01-01

    .Phys., 90(5):2492, 2001; Appl. Phys. Lett., 89:083515, 2006.) an experimental and theoretical analysis of the transduction of SAW under a metallic array of electrodes with a large aspect ratio on a piezoelectric substrate, whereby allowing the electrode height to become larger than one wavelength....... The multimode character of SAW propagation was observed and the explicit dependence of the SAW velocities as a function of the electrode height was obtained experimentally. Up to a 10-fold slowing of surface waves was observed, with the phase velocity dropping from 4000 m/s down to 450 m/s. We present...

  7. Photoablation characteristics of novel polyimides synthesized for high-aspect-ratio excimer laser LIGA process

    Science.gov (United States)

    Yang, Chii-Rong; Hsieh, Yu-Sheng; Hwang, Guang-Yeu; Lee, Yu-Der

    2004-04-01

    The photoablation properties of two soluble polyimides DMDB/6FDA and OT/6FDA with thicknesses of over 300 µm, synthesized by the polycondensation of a hexafluoropropyl group contained in a dianhydride with two kinds of diamines, are investigated using a 248 nm krypton fluoride (KrF) laser. The incorporation of the hexafluoropropyl group into the chemical structure gives these two polyimides higher etching rates than Kapton (a commercial polyimide film which is difficult to dissolve). The etching rates of synthesized polyimides are about 0.1-0.5 µm/pulse over a fluence range of 0.25-2.25 J cm-2. The photothermal mechanism for DMDB/6FDA contributes about 19% of etching depth at a laser fluence of 0.82 J cm-2. Moreover, the number of laser pulses seriously affects the taper angle of microstructures, especially at low fluence. Near-vertical side-wall structures can be built at high fluence (~2 J cm-2). Fresnel patterns with a thickness of 300 µm and a linewidth of 10 µm were fabricated, with an attainable aspect ratio of around 30. After photoablation, the complementary metallic microstructures were also fabricated by a sequential electroplating procedure. Then, those two new polyimides could be dissolved easily in most common solvents (such as THF, DMSO, NMP and DMF). These results indicate that these two soluble polyimides are highly suitable for use in the KrF laser LIGA process.

  8. Hot embossing of photonic crystal polymer structures with a high aspect ratio

    DEFF Research Database (Denmark)

    Schelb, Mauno; Vannahme, Christoph; Kolew, Alexander;

    2011-01-01

    Hot embossing is a promising approach for mass production of photonic crystal structures. This paper describes the fabrication of a replication tool for two-dimensional photonic crystal patterns and its replication in substrates of poly(methylmethacrylate) (PMMA) and cyclic olefin copolymer (COC......). A nickel tool for the replication of structures with lateral dimensions of 110 nm and heights of approximately 370 nm is fabricated via electroplating of a nanostructured sample resulting in an aspect ratio of approximately 3.5. The structures are subsequently hot embossed into PMMA and COC substrates....

  9. Millijoule femtosecond micro-Bessel beams for ultra-high aspect ratio machining.

    Science.gov (United States)

    Mitra, Sambit; Chanal, Margaux; Clady, Raphaël; Mouskeftaras, Alexandros; Grojo, David

    2015-08-20

    We report on a functional experimental design for Bessel beam generation capable of handling high-energy ultrashort pulses (up to 1.2 mJ per pulse of 50 fs duration). This allows us to deliver intensities exceeding the breakdown threshold for air or any dielectric along controlled micro-filaments with lengths exceeding 4 mm. It represents an unprecedented upscaling in comparison to recent femtosecond Bessel beam micromachining experiments. We produce void microchannels through glass substrates to demonstrate that aspect ratios exceeding 1200∶1 can be achieved by using single high-intensity pulses. This demonstration must lead to new methodologies for deep-drilling and high-speed cutting applications.

  10. Highly sensitive glucose biosensor based on Au-Ni coaxial nanorod array having high aspect ratio.

    Science.gov (United States)

    Hsu, Che-Wei; Wang, Gou-Jen

    2014-06-15

    An effective glucose biosensor requires a sufficient amount of GOx immobilizing on the electrode surface. An electrode of a 3D nanorod array, having a larger surface-to-volume ratio than a 2D nanostructure, can accommodate more GOx molecules to immobilize onto the surface of the nanorods. In this study, a highly sensitive Au-Ni coaxial nanorod array electrode fabricated through the integration of nano electroforming and immersion gold (IG) method for glucose detection was developed. The average diameter of the as-synthesized Ni nanorods and that of the Au-Ni nanorods were estimated to be 150 and 250 nm, respectively; both had a height of 30 μm. The aspect ratio was 120. Compared to that of a flat Au electrode, the effective sensing area was enhanced by 79.8 folds. Actual glucose detections demonstrated that the proposed Au-Ni coaxial nanorod array electrode could operate in a linear range of 27.5 μM-27.5mM with a detection limit of 5.5μM and a very high sensitivity of 769.6 μA mM(-1)cm(-2). Good selectivity of the proposed sensing device was verified by sequential injections of uric acid (UA) and ascorbic acid (AA). Long-term stability was examined through successive detections over a period of 30 days.

  11. High aspect-ratio MEMS devices for the next generation of THz/MHz passive components

    NARCIS (Netherlands)

    Fiorentino, G.

    2015-01-01

    The realization of efficient passive devices directly on chip represents one of the most intriguing challenges in IC fabrication processes. The performance of such devices are intrinsically determined by physical parameters that cannot be easily scaled, making the on-chip integration of such compone

  12. Patterning of periodic high-aspect-ratio nanopores in anatase titanium dioxide from titanium fluoride hydrolysis.

    Science.gov (United States)

    Tevis, Ian D; Stupp, Samuel I

    2011-05-01

    We report straight pores in titanium dioxide produced by a pattern transfer method with titanium fluoride hydrolysis. The resulting films on fluorine-doped tin oxide had pores with diameters of 30 nm and depths of 500 nm, corresponding to aspect ratios of 1:17.

  13. High-aspect-ratio photoresist processing for fabrication of high resolution and thick micro-windings

    Science.gov (United States)

    Anthony, Ricky; Laforge, Elias; Casey, Declan P.; Rohan, James F.; O'Mathuna, Cian

    2016-10-01

    DC winding losses remain a major roadblock in realizing high efficiency micro-magnetic components (inductors/transformers). This paper reports an optimized photoresist process using negative tone and acrylic based THB-151N (from JSR Micro), to achieve one of the highest aspect ratio (17:1) and resolution (~5 µm) resist patterns for fabrication of thick (~80 µm) micro-winding using UV lithography. The process was optimized to achieve photoresist widths from 5 µm to 20 µm with resist thickness of ~85 µm in a single spin step. Unlike SU-8, this resist can be readily removed and shows a near-vertical (~91°) electroplated Cu side-wall profile. Moreover, the high resolution compared to available resist processes enables a further reduction in the footprint area and can potentially increase the number of winding thereby increasing the inductance density for micro-magnetic components. Resistance measurements of electroplated copper winding of air-core micro-inductors within the standard 0402 size (0.45 mm2 footprint area) suggested a 42% decrease in resistance (273 mΩ-159 mΩ) with the increase in electroplated Cu thickness (from 50 µm to 80 µm). Reduction of the spacings (from 10 µm to 5 µm) enabled further miniaturisation of the device footprint area (from 0.60 mm2 to 0.45 mm2) without significant increase in resistance.

  14. Ordered and Ultra-High Aspect Ratio Nanocapillary Arrays as a Model System

    Science.gov (United States)

    2015-10-13

    nanocapillaries can be used to synthesize molecularly confined or form quantum confined nanostructures. We have shown these effects benefit to improve...10 3 10-2 10 1 100 101 102 103 104 Page 5 Copyright © 2015 Mainstream Engineering Corporation Thermodynamic • Joule Heating • Uneven...Complex thermal/electrochemical dependence  Rate-inhibiting concentration gradient established  Small environmental gradients effect long-term

  15. Low-energy electron transmission through high aspect ratio Al O nanocapillaries

    DEFF Research Database (Denmark)

    Milosavljević, A.R.; Jureta, J.; Víkor, G.;

    2009-01-01

    Electron transmission through insulating AlO nanocapillaries of different diameters (40 and 270 nm) and 15 μm length has been investigated for low-energy electrons (2-120 V). The total intensity of transmitted current weakly depends on the incident electron energy and tilt angle defined with resp......Electron transmission through insulating AlO nanocapillaries of different diameters (40 and 270 nm) and 15 μm length has been investigated for low-energy electrons (2-120 V). The total intensity of transmitted current weakly depends on the incident electron energy and tilt angle defined...

  16. Injection molding micro patterns with high aspect ratio using a polymeric flexible stamper

    Directory of Open Access Journals (Sweden)

    2011-11-01

    Full Text Available Poor filling occurs during the injection molding process of micro- or nano- scale patterns mainly because the hot polymer melt rapidly cools and its skin quickly solidifies upon contact with the mold surface. In this study, it is proposed to use Polyethylene terephthalate (PET film coated with patterned polyurethane acrylate (PUA as an effective thermal barrier. It can significantly hinder heat transfer into the mold during the molding process and thus may keep the melt viscosity low for longer duration. As a result, the replication would be improved not only during the filling phase but also during the packing phase. In order to verify the validity of the use of polymeric stamper, the melt-film interface temperature was evaluated by numerical simulation. Experimental results indicated that patterns possessing widths within the range of one to tens of micrometers and a height of approximately 10 µm were successfully filled and demolded.

  17. An atmospheric-pressure, high-aspect-ratio, cold micro-plasma.

    Science.gov (United States)

    Lu, X; Wu, S; Gou, J; Pan, Y

    2014-01-01

    An atmospheric pressure nonequilibrium Ar micro-plasma generated inside a micro-tube with plasma radius of 3 μm and length of 2.7 cm is reported. The electron density of the plasma plume estimated from the broadening of the Ar emission line reaches as high as 3 × 10(16) cm(-3). The electron temperature obtained from CR model is 1.5 ev while the gas temperature of the plasma estimated from the N2 rotational spectrum is close to room temperature. The sheath thickness of the plasma could be close to the radius of the plasma. The ignition voltages of the plasma increase one order when the radius of the dielectric tube is decreased from 1 mm to 3 μm.

  18. High Aspect Ratio Microstructures in Flexible Printed Circuit Boards : Process and Applications

    OpenAIRE

    Yousef, Hanna

    2008-01-01

    Flexible printed circuit boards (flex PCBs) are used in a wide range of electronic devices today due to their light weight, bendability, extensive wiring possibilities, and low-cost manufacturing techniques. The general trend in the flex PCB industry is further miniaturization alongside increasing functionality per device and reduced costs. To meet these demands, a new generation of low cost manufacturing technologies is being developed to enable structures with smaller lateral dimensions and...

  19. High-Aspect-Ratio CMOS add-on modules for RF passive components

    NARCIS (Netherlands)

    Sagkol, H.

    2011-01-01

    Commercial wireless communication technologies stemmed mostly from the research done through and after the Second World War as outlined in Chapter 1. Earlier systems were intended for military applications, hence had very high performance and were very expensive and bulky. Later, with the dawn of co

  20. Jet-Surface Interaction Noise from High-Aspect Ratio Nozzles: Test Summary

    Science.gov (United States)

    Brown, Clifford; Podboy, Gary

    2017-01-01

    Noise and flow data have been acquired for a 16:1 aspect ratio rectangular nozzle exhausting near a simple surface at the NASA Glenn Research Center as part of an ongoing effort to understand, model, and predict the noise produced by current and future concept aircraft employing a tightly integrated engine airframe designs. The particular concept under consideration in this experiment is a blended-wing-body airframe powered by a series of electric fans exhausting through slot nozzle over an aft deck. The exhaust Mach number and surface length were parametrically varied during the test. Far-field noise data were acquired for all nozzle surface geometries and exhaust flow conditions. Phased-array noise source localization data and in-flow pressure data were also acquired for a subset of the isolated (no surface) and surface configurations; these measurements provide data that have proven useful for modeling the jet-surface interaction noise source and the surface effect on the jet-mixing noise in round jets. A summary of the nozzle surface geometry, flow conditions tested, and data collected are presented.

  1. Key Techniques on Preparing High Aspect Ratio Micro and Nano Structures

    DEFF Research Database (Denmark)

    Jian, Zhao; Lianhe, Dong; Xiaoli, Zhu

    2016-01-01

    effectively. The mechanism of action between NaCl and HSQ was analyzed. The collapse and adhesion of resist structure due to the effect of gas-liquid interfacial capillary surface tension were suppressed by the CO2 supercritical drying method. Large-area dense nano-structures with the aspect ratio of 12...

  2. Numerical studies of the reversed-field pinch at high aspect ratio

    Science.gov (United States)

    Sätherblom, H.-E.; Drake, J. R.

    1998-10-01

    The reversed field pinch (RFP) configuration at an aspect ratio of 8.8 is studied numerically by means of the three-dimensional magnetohydrodynamic code DEBS [D. D. Schnack et al., J. Comput. Phys. 70, 330 (1987)]. This aspect ratio is equal to that of the Extrap T1 experiment [S. Mazur et al., Nucl. Fusion 34, 427 (1994)]. A numerical study of a RFP with this level of aspect ratio requires extensive computer achievements and has hitherto not been performed. The results are compared with previous studies [Y. L. Ho et al., Phys. Plasmas 2, 3407 (1995)] of lower aspect ratio RFP configurations. In particular, an evaluation of the extrapolation to the aspect ratio of 8.8 made in this previous study shows that the extrapolation of the spectral spread, as well as most of the other findings, are confirmed. An important exception, however, is the magnetic diffusion coefficient, which is found to decrease with aspect ratio. Furthermore, an aspect ratio dependence of the magnetic energy and of the helicity of the RFP is found.

  3. HIGH ASPECT RATIO ION EXCHANGE RESIN BED - HYDRAULIC RESULTS FOR SPERICAL RESIN BEADS

    Energy Technology Data Exchange (ETDEWEB)

    Duignan, M; Charles Nash, C; Timothy Punch, T

    2007-09-27

    A principal role of the DOE Savannah River Site is to safely dispose of a large volume of liquid nuclear waste held in many storage tanks. An in-tank ion exchange unit is being considered for cesium removal to accelerate waste processing. This unit is planned to have a relatively high bed height to diameter ratio (10:1). Complicating the design is the need to cool the ion exchange media; therefore, the ion exchange column will have a central cooling core making the flow path annular. To separate cesium from waste the media being considered is made of resorcinol formaldehyde resin deposited on spherical plastic beads and is a substitute for a previously tested resin made of crystalline silicotitanate. This spherical media not only has an advantage of being mechanically robust, but, unlike its predecessor, it is also reusable, that is, loaded cesium can be removed through elution and regeneration. Resin regeneration leads to more efficient operation and less spent resin waste, but its hydraulic performance in the planned ion exchange column was unknown. Moreover, the recycling process of this spherical resorcinol formaldehyde causes its volume to significantly shrink and swell. To determine the spherical media's hydraulic demand a linearly scaled column was designed and tested. The waste simulant used was prototypic of the wastes' viscosity and density. This paper discusses the hydraulic performance of the media that will be used to assist in the design of a full-scale unit.

  4. Ablative implosion of high-aspect-ratio gas-filled targets

    Energy Technology Data Exchange (ETDEWEB)

    Tomasel, F.G.; Cortazar, O.D. (Universidad Nacional de Mar del Plata (Argentina). Dept. de Fisica); Piriz, A.R. (Buenos Aires Univ. (Argentina). Dept. de Fisica)

    1991-11-01

    A simple analytical mode for the implosion of very thin spherical shell targets filled with fuel gas is developed. The shock trajectory in the fuel is described consistently with the shell acceleration, and two dimensionless parameters which govern the complete dynamics are found. The model applies to recent experiments focused on high neutron yield and provides a simple description of the main physical phenomena, which is in agreement with simulation and experiments. (author).

  5. Mechanical Design of High Lift Systems for High Aspect Ratio Swept Wings

    Science.gov (United States)

    Rudolph, Peter K. C.

    1998-01-01

    The NASA Ames Research Center is working to develop a methodology for the optimization and design of the high lift system for future subsonic airliners with the involvement of two partners. Aerodynamic analysis methods for two dimensional and three dimensional wing performance with flaps and slats deployed are being developed through a grant with the aeronautical department of the University of California Davis, and a flap and slat mechanism design procedure is being developed through a contract with PKCR, Inc., of Seattle, WA. This report documents the work that has been completed in the contract with PKCR on mechanism design. Flap mechanism designs have been completed for seven (7) different mechanisms with a total of twelve (12) different layouts all for a common single slotted flap configuration. The seven mechanisms are as follows: Simple Hinge, Upside Down/Upright Four Bar Linkage (two layouts), Upside Down Four Bar Linkages (three versions), Airbus A330/340 Link/Track Mechanism, Airbus A320 Link/Track Mechanism (two layouts), Boeing Link/Track Mechanism (two layouts), and Boeing 767 Hinged Beam Four Bar Linkage. In addition, a single layout has been made to investigate the growth potential from a single slotted flap to a vane/main double slotted flap using the Boeing Link/Track Mechanism. All layouts show Fowler motion and gap progression of the flap from stowed to a fully deployed position, and evaluations based on spanwise continuity, fairing size and number, complexity, reliability and maintainability and weight as well as Fowler motion and gap progression are presented. For slat design, the options have been limited to mechanisms for a shallow leading edge slat. Three (3) different layouts are presented for maximum slat angles of 20 deg, 15 deg and 1O deg all mechanized with a rack and pinion drive similar to that on the Boeing 757 airplane. Based on the work of Ljungstroem in Sweden, this type of slat design appears to shift the lift curve so that higher lift is achieved with the deployed slat with no increase in angle of attack. The layouts demonstrate that these slat systems can be designed with no need for slave links, and an experimental test program is outlined to experimentally validate the lift characteristics of the shallow slat.

  6. Finite element analysis of surface acoustic waves in high aspect ratio electrodes

    DEFF Research Database (Denmark)

    Dühring, Maria Bayard; Laude, Vincent; Khelif, Abdelkrim

    2008-01-01

    down the SAWvelocity because of mechanical energy storage. A finite model is furthermore employed to study the acousto-optical interaction and shows that it is possible to get a bigger change in effective refractive index with these surface acoustic waves compared to using conventional interdigital...

  7. High aspect-ratio MEMS devices for the next generation of THz/MHz passive components

    NARCIS (Netherlands)

    Fiorentino, G.

    2015-01-01

    The realization of efficient passive devices directly on chip represents one of the most intriguing challenges in IC fabrication processes. The performance of such devices are intrinsically determined by physical parameters that cannot be easily scaled, making the on-chip integration of such

  8. An Automated High Aspect Ratio Mesher for Computational Fluid Dynamics Project

    Data.gov (United States)

    National Aeronautics and Space Administration — Computational fluid dynamics (CFD) simulations are routinely used while designing, analyzing, and optimizing air- and spacecraft. An important component of CFD...

  9. Interaction between photoresist pretreatment and high-aspect-ratio contact and via hole definition

    Science.gov (United States)

    Brown, Kevin C.; Insalaco, Linda J.; Szeto, Elina C.

    1993-09-01

    The relationship between photoresist treatment prior to etch and subsequent oxide sidewall hole profile is investigated. Etched features were examined immediately after resist pattern definition with post-expose bake, then after oven hard bake or deep UV photostabilization. It was observed that taper of the etched oxide profile depends on pre-treatment temperature. Etch chemistry influences the relative change in taper across a range of pre-treatment temperatures. `Bowing,' as well as reticulated or `burnt' resist is eliminated. Profile variation across the wafer is reduced with deep UV photostabilization. Microscopic etch uniformity (RIE lag) also depends on the interaction between resist pre-treatment and oxide etch chemistry.

  10. Filling high aspect ratio trenches by superconformal chemical vapor deposition: Predictive modeling and experiment

    Science.gov (United States)

    Wang, Wenjiao B.; Abelson, John R.

    2014-11-01

    Complete filling of a deep recessed structure with a second material is a challenge in many areas of nanotechnology fabrication. A newly discovered superconformal coating method, applicable in chemical vapor deposition systems that utilize a precursor in combination with a co-reactant, can solve this problem. However, filling is a dynamic process in which the trench progressively narrows and the aspect ratio (AR) increases. This reduces species diffusion within the trench and may drive the component partial pressures out of the regime for superconformal coating. We therefore derive two theoretical models that can predict the possibility for filling. First, we recast the diffusion-reaction equation for the case of a sidewall with variable taper angle. This affords a definition of effective AR, which is larger than the nominal AR due to the reduced species transport. We then derive the coating profile, both for superconformal and for conformal coating. The critical (most difficult) step in the filling process occurs when the sidewalls merge at the bottom of the trench to form the V shape. Experimentally, for the Mg(DMADB)2/H2O system and a starting AR = 9, this model predicts that complete filling will not be possible, whereas experimentally we do obtain complete filling. We then hypothesize that glancing-angle, long-range transport of species may be responsible for the better than predicted filling. To account for the variable range of species transport, we construct a ballistic transport model. This incorporates the incident flux from outside the structure, cosine law re-emission from surfaces, and line-of-sight transport between internal surfaces. We cast the transport probability between all positions within the trench into a matrix that represents the redistribution of flux after one cycle of collisions. Matrix manipulation then affords a computationally efficient means to determine the steady-state flux distribution and growth rate for a given taper angle. The ballistic transport model predicts a deeper position for the peak of the super-conformal growth rate than the diffusion-reaction model, and successfully explains the observation of complete filling. These models can be used to predict the behavior of any system given a small set of kinetic coefficients to describe the growth rate.

  11. High precision and high aspect ratio laser drilling: challenges and solutions

    Science.gov (United States)

    Uchtmann, Hermann; He, Chao; Gillner, Arnold

    2016-03-01

    Laser drilling is a very versatile tool to produce high accuracy bores in small and large geometries using different technologies. In large and deep hole drilling laser drilling can be found in drilling cooling holes into turbomachinery components such as turbine blades. In micro drilling, the technology is used for the generation of nozzles and filters. However, especially in macro drilling, the process often causes microstructure changes and induces defects such as recast layers and cracks. The defects are caused by the melt dominated drilling process by using pulse durations in the range of some 100 μm up to a few ms. A solution of this problem is the use of ultrashort pulsed laser radiation with pulse durations in the range of some 100 fs up to a few ps, however with the disadvantage of long drilling times. Thus, the aim of this work is to combine the productive process by using ms pulsed fiber laser radiation with subsequent ablation of existing recast layers at the hole wall by using ultrashort pulsed laser radiation. By using fast scanning techniques the recast layer can be avoided almost completely. With a similar technology also very small hole can be produced. Using a rotating dove prism a circular oscillation of the laser spots is performed and holes are drilled at intervals in 1 mm thick stainless steel (1.4301) by ultra-short laser pulses of 7 ps at 515 nm. The formation of hole and the behavior of energy deposition differ from other drilling strategies due to the helical revolution. The temporal evolution of the hole shape is analyzed by means of SEM techniques from which three drilling phases can be distinguished.

  12. Study of selective chemical downstream plasma etching of silicon nitride and silicon oxide for advanced patterning applications

    Science.gov (United States)

    Prévost, Emilie; Cunge, Gilles; De-Buttet, Côme; Lagrasta, Sebastien; Vallier, Laurent; Petit-Etienne, Camille

    2017-03-01

    The evolution of integrated components in the semiconductors industry is nowadays looking for ultra-high selective etching processes in order to etch high aspect ratio structures in complicated stacks of ultrathin layers. For ultra-high selective processes, typical plasma etching show limitations, while wet etching processes reach limitations due to capillary forces. For these reasons there is a great regain of interest today in chemical downstream etching systems (CDE), which combine the advantages of plasma and wet treatments. The absence of photons and ions allow to minimize damages and to achieve very high selectivity (in isotropic etching). In this work we investigated the parameters enabling to etch selectively the Si3N4 to the SiO2 by CDE. We shown that the correlation between the gas mixture and the wafer temperature is the key to obtain the desired selectivity. In order to optimize the processing window, the mixture composition (NF3/N2/O2/He) and the temperatures were screened by several DOE (Designs Of Experiments). Conditions are found in which the etching selectivity between the two silicon alloys is higher than 100, which allowed us to clean out sacrificial Si3N4 layers in very high aspect ratio (about 100) silicon trenches of nanometric size (60nm) without damaging the 10nm thin SiO2 caping layer (between the Si and the Si3N4). This demonstrates that downstream plasma etching can perform better than wet treatments in this case.

  13. Fabrication and Photovoltaic Characteristics of Coaxial Silicon Nanowire Solar Cells Prepared by Wet Chemical Etching

    Directory of Open Access Journals (Sweden)

    Chien-Wei Liu

    2012-01-01

    Full Text Available Nanostructured solar cells with coaxial p-n junction structures have strong potential to enhance the performances of the silicon-based solar cells. This study demonstrates a radial junction silicon nanowire (RJSNW solar cell that was fabricated simply and at low cost using wet chemical etching. Experimental results reveal that the reflectance of the silicon nanowires (SNWs declines as their length increases. The excellent light trapping was mainly associated with high aspect ratio of the SNW arrays. A conversion efficiency of ∼7.1% and an external quantum efficiency of ∼64.6% at 700 nm were demonstrated. Control of etching time and diffusion conditions holds great promise for the development of future RJSNW solar cells. Improving the electrode/RJSNW contact will promote the collection of carries in coaxial core-shell SNW array solar cells.

  14. Silicon dioxide mask by plasma enhanced atomic layer deposition in focused ion beam lithography

    Science.gov (United States)

    Liu, Zhengjun; Shah, Ali; Alasaarela, Tapani; Chekurov, Nikolai; Savin, Hele; Tittonen, Ilkka

    2017-02-01

    In this work, focused ion beam (FIB) lithography was developed for plasma enhanced atomic layer deposited (PEALD) silicon dioxide SiO2 hard mask. The PEALD process greatly decreases the deposition temperature of the SiO2 hard mask. FIB Ga+ ion implantation on the deposited SiO2 layer increases the wet etch resistivity of the irradiated region. A programmed exposure in FIB followed by development in a wet etchant enables the precisely defined nanoscale patterning. The combination of FIB exposure parameters and the development time provides greater freedom for optimization. The developed process provides high pattern dimension accuracy over the tested range of 90–210 nm. Utilizing the SiO2 mask developed in this work, silicon nanopillars with 40 nm diameter were successfully fabricated with cryogenic deep reactive ion etching and the aspect ratio reached 16:1. The fabricated mask is suitable for sub-100 nm high aspect ratio silicon structure fabrication.

  15. Continuous-flow fractionation of selenium in contaminated sediment and soil samples using rotating coiled column and microcolumn extraction.

    Science.gov (United States)

    Savonina, Elena Yu; Fedotov, Petr S; Wennrich, Rainer

    2012-01-15

    Dynamic fractionation is considered to be an attractive alternative to conventional batch sequential extraction procedures for partitioning of trace metals and metalloids in environmental solid samples. This paper reports the first results on the continuous-flow dynamic fractionation of selenium using two different extraction systems, a microcolumn (MC) packed with the solid sample and a rotating coiled column (RCC) in which the particulate matter is retained under the action of centrifugal forces. The eluents (leachants) were applied in correspondence with a four-step sequential extraction scheme for selenium addressing "soluble", "adsorbed", "organically bound", and "elemental" Se fractions extractable by distilled water, phosphate buffer, tetramethylammonium hydroxide, and sodium sulphite solutions, respectively. Selenium was determined in the effluent by using an inductively coupled plasma atomic emission spectrometer. Contaminated creek sediment and dumped waste (soil) samples from the abandoned mining area were used to evaluate resemblances and discrepancies of two continuous-flow methods for Se fractionation. In general, similar trends were found for Se distribution between extractable and residual fractions. However, for the dumped waste sample which is rich in organic matter, the extraction in RCC provided more effective recovery of environmentally relevant Se forms (the first three leachable fractions). The most evident deviation was observed for "adsorbed" Se (recoveries by RCC and MC are 43 and 7 mg kg(-1), respectively). The data obtained were correlated with peculiarities of samples under investigation and operational principles of RCC and MC.

  16. Cold Spray Deposition of Copper Electrodes on Silicon and Glass Substrates

    Science.gov (United States)

    Kim, Do-Yeon; Park, Jung-Jae; Lee, Jong-Gun; Kim, Donghwan; Tark, Sung Ju; Ahn, Sejin; Yun, Jae Ho; Gwak, Jihye; Yoon, Kyung Hoon; Chandra, Sanjeev; Yoon, Sam S.

    2013-10-01

    Copper lines with widths varying from 150 to 1500 μm were deposited onto crystalline silicon wafers and soda-lime glass plates by cold spraying copper particles with 1 μm average diameter through a mask. This direct deposition method yielded high-aspect-ratio electrodes with minimum shadowing effects and maximum electrode-to-silicon contact area. The copper lines had triangular cross sections with aspect ratios (height/width) ranging from 0.1 to 1.1, depending on the number of spray gun passes. Copper particles were densely packed with increasing the width of the masking slit. This study presents the potential use of the cold spray technology in printing lines as front electrodes in solar cell applications.

  17. Precision depth measurement of through silicon vias (TSVs) on 3D semiconductor packaging process.

    Science.gov (United States)

    Jin, Jonghan; Kim, Jae Wan; Kang, Chu-Shik; Kim, Jong-Ahn; Lee, Sunghun

    2012-02-27

    We have proposed and demonstrated a novel method to measure depths of through silicon vias (TSVs) at high speed. TSVs are fine and deep holes fabricated in silicon wafers for 3D semiconductors; they are used for electrical connections between vertically stacked wafers. Because the high-aspect ratio hole of the TSV makes it difficult for light to reach the bottom surface, conventional optical methods using visible lights cannot determine the depth value. By adopting an optical comb of a femtosecond pulse laser in the infra-red range as a light source, the depths of TSVs having aspect ratio of about 7 were measured. This measurement was done at high speed based on spectral resolved interferometry. The proposed method is expected to be an alternative method for depth inspection of TSVs.

  18. A Study on the Thermomechanical Reliability Risks of Through-Silicon-Vias in Sensor Applications

    Directory of Open Access Journals (Sweden)

    Shuai Shao

    2017-02-01

    Full Text Available Reliability risks for two different types of through-silicon-vias (TSVs are discussed in this paper. The first is a partially-filled copper TSV, if which the copper layer covers the side walls and bottom. A polymer is used to fill the rest of the cavity. Stresses in risk sites are studied and ranked for this TSV structure by FEA modeling. Parametric studies for material properties (modulus and thermal expansion of TSV polymer are performed. The second type is a high aspect ratio TSV filled by polycrystalline silicon (poly Si. Potential risks of the voids in the poly Si due to filling defects are studied. Fracture mechanics methods are utilized to evaluate the risk for two different assembly conditions: package assembled to printed circuit board (PCB and package assembled to flexible substrate. The effect of board/substrate/die thickness and the size and location of the void are discussed.

  19. Microfabricated silicon gas chromatographic micro-channels: fabrication and performance

    Energy Technology Data Exchange (ETDEWEB)

    Matzke, C.M.; Kottenstette, R.J.; Casalnuovo, S.A.; Frye-Mason, G.C.; Hudson, M.L.; Sasaki, D.Y.; Manginell, R.P.; Wong, C.C.

    1998-11-01

    Using both wet and plasma etching, we have fabricated micro-channels in silicon substrates suitable for use as gas chromatography (GC) columns. Micro-channel dimensions range from 10 to 80 {micro}m wide, 200 to 400 {micro}m deep, and 10 cm to 100 cm long. Micro-channels 100 cm long take up as little as 1 cm{sup 2} on the substrate when fabricated with a high aspect ratio silicon etch (HARSE) process. Channels are sealed by anodically bonding Pyrex lids to the Si substrates. We have studied micro-channel flow characteristics to establish model parameters for system optimization. We have also coated these micro-channels with stationary phases and demonstrated GC separations. We believe separation performance can be improved by increasing stationary phase coating uniformity through micro-channel surface treatment prior to stationary phase deposition. To this end, we have developed microfabrication techniques to etch through silicon wafers using the HARSE process. Etching completely through the Si substrate facilitates the treatment and characterization of the micro- channel sidewalls, which domminate the GC physico-chemical interaction. With this approach, we separately treat the Pyrex lid surfaces that form the top and bottom surfaces of the GC flow channel.

  20. Improved detection of hydrophilic phosphopeptides using graphite powder microcolumns and mass spectrometry: evidence for in vivo doubly phosphorylated dynamin I and dynamin III

    DEFF Research Database (Denmark)

    Larsen, Martin Røssel; Graham, Mark E; Robinson, Phillip J

    2004-01-01

    , or peptides altered in hydrophilicity such as phosphopeptides. We used microcolumns to compare the ability of RP resin or graphite powder to retain phosphopeptides. A number of standard phosphopeptides and a biologically relevant phosphoprotein, dynamin I, were analyzed. MS revealed that some phosphopeptides...... did not bind the RP resin but were retained efficiently on the graphite. Those that did bind the RP resin often produced much stronger signals from the graphite powder. In particular, the method revealed a doubly phosphorylated peptide in a tryptic digest of dynamin I purified from rat brain nerve...... and doubly phosphorylated peptide in dynamin III, analogous to the dynamin I sequence. A pair of dynamin III phosphorylation sites were found at Ser-759 and Ser-763 by tandem MS. The results directly define the in vivo phosphorylation sites in dynamins I and III for the first time. The findings indicate...

  1. Fabrication of Micro-column Array Filled With CH for ICF Target%微米柱阵列ICF埋点靶的制备

    Institute of Scientific and Technical Information of China (English)

    王衍斌; 唐永建; 朱效立; 张林; 陈志梅; 马小军

    2011-01-01

    微米柱阵列埋点靶是研究超短激光辐照靶激光吸收效率和等离子体产生过程及发展的1种重要靶型.本文结合采用电子束刻蚀、X射线刻蚀和微电镀等制备金微米点阵列,用CVD方法对阵列间隙填充无应力CH薄膜,用SEM、AFM与白光干涉仪等对制作过程和结果样品进行检测.结果表明,用电子束刻蚀方法制作的掩膜分辨率好、边缘光滑.用同步辐射的X光制作高质量样品,样品点柱高宽比为4,垂直度近于90°,点柱阵列周期为2×2μm,CH层厚约4μm.%The target with micro-column array embedded in CH is a kind of target which is important to research ps/fs laser absorbing efficiency and plasma generating and developing when laser irradiated it. A way to fabricate the target was implemented. The electronic beam-etching, X-ray etching and micro-plating were used to fabricate micrometer array and space was filled with CH in it. The SEM, AFM and white-light interferometer were used to characterize the sample. The result shows that the micro-column ratio of high and width is 4, the verticality is close to 90° and the space is 2×2 μm, and the thickness of CH is 4μm.

  2. A study of high-altitude manned research aircraft employing strut-braced wings of high-aspect-ratio

    Science.gov (United States)

    Smith, P. M.; Deyoung, J.; Lovell, W. A.; Price, J. E.; Washburn, G. F.

    1981-01-01

    The effect of increased wing aspect ratio of subsonic aircraft on configurations with and without strut bracing. Results indicate that an optimum cantilever configuration, with a wing aspect ratio of approximately 26, has a 19% improvement in cruise range when compared to a baseline concept with a wing aspect ratio of approximately 10. An optimum strut braced configuration, with a wing aspect ratio of approximately 28, has a 31% improvment in cruise range when compared to the same baseline concept. This improvement is mainly due to the estimated reduction in wing weight resulting from use of lifting struts. All configurations assume the same mission payload and fuel. The drag characteristics of the wings are enhanced with the use of laminar flow airfoils. A method for determining the extent of attainable natural laminar flow, and methods for preliminary structural design and for aerodynamic analysis of wings lifting struts are presented.

  3. Multi-Objective Flight Control for Drag Minimization and Load Alleviation of High-Aspect Ratio Flexible Wing Aircraft

    Science.gov (United States)

    Nguyen, Nhan; Ting, Eric; Chaparro, Daniel; Drew, Michael; Swei, Sean

    2017-01-01

    As aircraft wings become much more flexible due to the use of light-weight composites material, adverse aerodynamics at off-design performance can result from changes in wing shapes due to aeroelastic deflections. Increased drag, hence increased fuel burn, is a potential consequence. Without means for aeroelastic compensation, the benefit of weight reduction from the use of light-weight material could be offset by less optimal aerodynamic performance at off-design flight conditions. Performance Adaptive Aeroelastic Wing (PAAW) technology can potentially address these technical challenges for future flexible wing transports. PAAW technology leverages multi-disciplinary solutions to maximize the aerodynamic performance payoff of future adaptive wing design, while addressing simultaneously operational constraints that can prevent the optimal aerodynamic performance from being realized. These operational constraints include reduced flutter margins, increased airframe responses to gust and maneuver loads, pilot handling qualities, and ride qualities. All of these constraints while seeking the optimal aerodynamic performance present themselves as a multi-objective flight control problem. The paper presents a multi-objective flight control approach based on a drag-cognizant optimal control method. A concept of virtual control, which was previously introduced, is implemented to address the pair-wise flap motion constraints imposed by the elastomer material. This method is shown to be able to satisfy the constraints. Real-time drag minimization control is considered to be an important consideration for PAAW technology. Drag minimization control has many technical challenges such as sensing and control. An initial outline of a real-time drag minimization control has already been developed and will be further investigated in the future. A simulation study of a multi-objective flight control for a flight path angle command with aeroelastic mode suppression and drag minimization demonstrates the effectiveness of the proposed solution. In-flight structural loads are also an important consideration. As wing flexibility increases, maneuver load and gust load responses can be significant and therefore can pose safety and flight control concerns. In this paper, we will extend the multi-objective flight control framework to include load alleviation control. The study will focus initially on maneuver load minimization control, and then subsequently will address gust load alleviation control in future work.

  4. Oxidative Unzipping and Transformation of High Aspect Ratio Boron Nitride Nanotubes into “White Graphene Oxide” Platelets

    Science.gov (United States)

    Nautiyal, Pranjal; Loganathan, Archana; Agrawal, Richa; Boesl, Benjamin; Wang, Chunlei; Agarwal, Arvind

    2016-07-01

    Morphological and chemical transformations in boron nitride nanotubes under high temperature atmospheric conditions is probed in this study. We report atmospheric oxygen induced cleavage of boron nitride nanotubes at temperatures exceeding 750 °C for the first time. Unzipping is then followed by coalescence of these densely clustered multiple uncurled ribbons to form stacks of 2D sheets. FTIR and EDS analysis suggest these 2D platelets to be Boron Nitride Oxide platelets, with analogous structure to Graphene Oxide, and therefore we term them as “White Graphene Oxide” (WGO). However, not all BNNTs deteriorate even at temperatures as high as 1000 °C. This leads to the formation of a hybrid nanomaterial system comprising of 1D BN nanotubes and 2D BN oxide platelets, potentially having advanced high temperature sensing, radiation shielding, mechanical strengthening, electron emission and thermal management applications due to synergistic improvement of multi-plane transport and mechanical properties. This is the first report on transformation of BNNT bundles to a continuous array of White Graphene Oxide nanoplatelet stacks.

  5. Conductivity and methanol permeability of Nafion-zirconium phosphate composite membranes containing high aspect ratio filler particles

    Energy Technology Data Exchange (ETDEWEB)

    Bagnasco, G.; Micoli, L.; Turco, M. [Dipartimento di Ingegneria Chimica, Universita di Napoli Federico II, P.le V. Tecchio 80, 80125 - Napoli (Italy); Donnadio, A.; Pica, M.; Sganappa, M. [Dipartimento di Chimica, Universita di Perugia, via Elce di Sotto 8, 06123 - Perugia (Italy); Casciola, M.

    2009-08-15

    Gels of exfoliated {alpha}-zirconium phosphate (ZrP{sub exf}) in dimethylformamide (DMF) were used to prepare Nafion/ZrP{sub exf} composite membranes with filler loadings up to 7 wt.-% by casting mixtures of Nafion 1100 solutions in DMF and suitable amounts of 2 wt.-% ZrP gels in DMF. TEM pictures showed that the ZrP{sub exf} particles had aspect ratio of at least 20. All samples were characterised by methanol permeability (P) and through-plane ({sigma}{sub thp}) and in-plane ({sigma}{sub inp}) conductivity measurements at 40 C and 100% RH. The methanol permeability of Nafion membranes containing in situ grown ZrP particles with low aspect ratio (Nafion/ZrP{sub isg}) was also determined. The methanol permeability and the swelling behaviour of the composite membranes turned out to be strongly dependent on the filler morphology. As a general trend, both permeability and swelling decreased according to the sequence: Nafion/ZrP{sub isg} > Nafion > Nafion/ZrP{sub exf}. The maximum selectivity ({sigma}{sub thp}/P = 1.4 x 10{sup 5} S cm{sup -3} s) was found for the membrane filled with 1 wt.-% ZrP{sub exf}: this value is seven times higher than that of Nafion. For the Nafion/ZrP{sub exf} membranes, the ratio {sigma}{sub inp}/{sigma}{sub thp} increases with the filler loading, thus indicating that the preferred orientation of the ZrP sheets is parallel to the membrane surface. (Abstract Copyright [2009], Wiley Periodicals, Inc.)

  6. Direct Observation of Two Phase Flow Generated by an Alumina Seeded Grain in High Aspect Ratio Channels

    Science.gov (United States)

    2010-06-01

    and the characteristic length is 44.45 mm. Finally, the convection coefficient is calculated to be 298 W/m2*K. Incropera and Dewitt note that...Advanced Strength and Applied Elasticity (4th ed.). Upper Saddle, NJ: Prentice Hall PTR, 2003. [11] F. P. Incropera and D. P. DeWitt

  7. Fabricating and Tailoring Polyaniline (PANI) Nanofibers with High Aspect Ratio in a Low-Acid Environment in a Magnetic Field.

    Science.gov (United States)

    Ma, Yong; Chen, Yanhui; Mei, Ang; Qiao, Mingtao; Hou, Chunping; Zhang, Hepeng; Zhang, Qiuyu

    2016-01-01

    In a 0.010 m HCl solution, we successfully transformed irregular polyaniline (PANI) agglomerates into uniform PANI nanofibers with a diameter of 46-145 nm and a characteristic length on the order of several microns by the addition of superparamagnetic Fe3 O4 microspheres in a magnetic field. The PANI morphological evolution showed that the PANI nanofibers stemmed from the PANI coating shell synthesized on the surface of the Fe3 O4 microsphere chains. It was found that the magnetic field could optimize the PANI nanofibers with a narrow diameter size distribution, and effectively suppressed secondary growth. When compared with other microspheres (like silica and polystyrene), only the use of superparamagnetic Fe3 O4 microspheres resulted in the appearance of PANI nanofibers. Attempts to form these high-quality PANI nanofibers in other concentrations of HCl solution were unsuccessful. This deficiency was largely attributed to the inappropriate quantity of aniline cations. © 2016 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

  8. Internal Laser Writing of High-Aspect-Ratio Microfluidic Structures in Silicate Glasses for Lab-on-a-Chip Applications

    Directory of Open Access Journals (Sweden)

    Ya Cheng

    2017-02-01

    Full Text Available Femtosecond laser direct writing is unique in allowing for fabrication of 3D micro- and nanofluidic structures, thereby enabling rapid and efficient manipulation of fluidic dynamics in 3D space to realize innovative functionalities. Here, I discuss the challenges in producing fully functional and highly integrated 3D micro- and nanofluidic systems with potential applications ranging from chemical and biological analyses to investigations of nanofluidic behaviors. In particular, I review the achievements we have made in the past decade, which have led to 3D microchannels with controllable cross-sectional profiles and large aspect ratios, 3D nanofluidic channels with widths of several tens of nanometers, and smooth inner walls with roughness on the order of ~1 nm. Integration of the microfluidics with other functional microcomponents including microoptics and microelectrodes will also be discussed, followed by conclusions and the future perspective.

  9. BisGMA/TEGDMA dental nanocomposites containing glyoxylic acid modified high-aspect ratio hydroxyapatite nanofibers with enhanced dispersion

    Science.gov (United States)

    Chen, Liang; Xu, Changqi; Wang, Yong; Shi, Jian; Yu, Qingsong

    2012-01-01

    The purpose of this research was to investigate the influence of the glyoxylic acid (GA) modification of hydroxyapatite (HAP) nanofibers on their dispersion in bisphenol A glycidyl methacrylate (BisGMA)/triethylene glycol dimethacrylate (TEGDMA) dental composites and also investigate the mechanical properties, water absorption, and water solubility of the resulting dental resins and composites. Scanning/Transmission electron microscopy (STEM) images showed that microsized HAP nanofiber bundles could be effectively broken down to individual HAP nanofibers with an average length of ~15 μm after the surface modification process. Fourier transform infrared spectroscopy (FT-IR), X-ray photoelectron spectroscopy (XPS) and thermal gravimetric analysis (TGA) characterization confirmed glyoxylic acid was chemically grafted on the HAP nanofiber surface, hypothetically by reacting with the amine group on HAP nanofiber surface. The enhanced dispersion of HAP nanofibers in dental matrix led to increased biaxial flexural strength (BFS) compared with the corresponding dental resins and composites filled with untreated HAP nanofibers. In addition, impregnation of small mass fractions of the glyoxylic acid modified HAP nanofibers into the BisGMA/TEGDMA dental resins (5wt%, 10wt%) or composites (2wt%, 3wt%) could also substantially improve the BFS in comparison with the controls(pure resins or dental composites filled with silica particles alone). Larger mass fractions could not further increase the mechanical property or even degrade the BFS values. Water behavior testing results indicated that the addition of glyoxylic acid modified HAP nanofibers resulted in higher water absorption and water solubility values which is not preferred for clinical application. In summary, well dispersed HAP nanofibers and their dental composites with enhanced mechanical property have been successfully fabricated but the water absorption and water solubility of such dental composites need to be further improved. PMID:22689264

  10. BisGMA/TEGDMA dental nanocomposites containing glyoxylic acid modified high-aspect ratio hydroxyapatite nanofibers with enhanced dispersion

    OpenAIRE

    Chen, Liang; Xu, Changqi; Wang,Yong; Shi, Jian; Yu, Qingsong; Li, Hao

    2012-01-01

    The purpose of this research was to investigate the influence of the glyoxylic acid (GA) modification of hydroxyapatite (HAP) nanofibers on their dispersion in bisphenol A glycidyl methacrylate (BisGMA)/triethylene glycol dimethacrylate (TEGDMA) dental composites and also investigate the mechanical properties, water absorption, and water solubility of the resulting dental resins and composites. Scanning/Transmission electron microscopy (STEM) images showed that microsized HAP nanofiber bundle...

  11. Design and microfabrication of a high-aspect-ratio PDMS microbeam array for parallel nanonewton force measurement and protein printing

    Science.gov (United States)

    Sasoglu, F. M.; Bohl, A. J.; Layton, B. E.

    2007-03-01

    Cell and protein mechanics has applications ranging from cellular development to tissue engineering. Techniques such as magnetic tweezers, optic tweezers and atomic force microscopy have been used to measure cell deformation forces of the order of piconewtons to nanonewtons. In this study, an array of polymeric polydimethylsiloxane (PDMS) microbeams with diameters of 10-40 µm and lengths of 118 µm was fabricated from Sylgard® with curing agent concentrations ranging from 5% to 20%. The resulting spring constants were 100-300 nN µm-1. The elastic modulus of PDMS was determined experimentally at different curing agent concentrations and found to be 346 kPa to 704 kPa in a millimeter-scale array and ~1 MPa in a microbeam array. Additionally, the microbeam array was used to print laminin for the purpose of cell adhesion. Linear and nonlinear finite element analyses are presented and compared to the closed-from solution. The highly compliant, transparent, biocompatible PDMS may offer a method for more rapid throughput in cell and protein mechanics force measurement experiments with sensitivities necessary for highly compliant structures such as axons.

  12. Acoustic Scattering from Sand Dollars (Dendraster excentricus): Modeling as High Aspect Ratio Oblate Objects and Comparison to Experiment

    Science.gov (United States)

    2008-09-01

    naturally occurring dense collections. These benthic echinoderms can form concentrations of up to several hundred per square meter in the sandy, shallow...L. (1972). “A new approach to the shaded picture problem”, Proc ACM National Conf. Nichols, D. (1969). Echinoderms , 4th edition (Hutchinson & Co

  13. Narrow conductive structures with high aspect ratios through single-pass inkjet printing and evaporation-induced dewetting

    NARCIS (Netherlands)

    Abbel, R.; Teunissen, P.; Michels, J.; Groen, W.A.

    2015-01-01

    Inkjet printed silver lines contract to widths below 20-μm during drying on an organic planarization coating. Aspect ratios previously unprecedented with single pass inkjet printing on isotropic homogeneous substrates are obtained. This effect is caused by the subsequent evaporation of solvents from

  14. An implicit wetting and drying approach for non-hydrostatic baroclinic flows in high aspect ratio domains

    Science.gov (United States)

    Candy, A. S.

    2017-04-01

    A new approach to modelling free surface flows is developed that enables, for the first time, 3D consistent non-hydrostatic baroclinic physics that wets and drys in the large aspect ratio spatial domains that characterise geophysical systems. This is key in the integration of physical models to permit seamless simulation in a single consistent arbitrarily unstructured multiscale and multi-physics dynamical model. A high order continuum representation is achieved through a general Galerkin finite element formulation that guarantees local and global mass conservation, and consistent tracer advection. A flexible spatial discretisation permits conforming domain bounds and a variable spatial resolution, whilst atypical use of fully implicit time integration ensures computational efficiency. Notably this brings the natural inclusion of non-hydrostatic baroclinic physics and a consideration of vertical inertia to flood modelling in the full 3D domain. This has application in improving modelling of inundation processes in geophysical domains, where dynamics proceeds over a large range of horizontal extents relative to vertical resolution, such as in the evolution of a tsunami, or in urban environments containing complex geometric structures at a range of scales.

  15. Fabrication of High Aspect Ratio Through-Wafer Vias in CMOS Wafers for 3-D Packaging Applications

    DEFF Research Database (Denmark)

    Rasmussen, Frank Engel; Frech, J.; Heschel, M.

    2003-01-01

    A process for fabrication of through-wafer vias in CMOS wafers is presented. The process presented offers simple and well controlled fabrication of through-wafer vias using DRIE formation of wafer through-holes, low temperature deposition of through-hole insulation, doubled sided sputtering of Cr....../Au, and electroless deposition of Cu. A novel characteristic of the process is the use of a metal etch stop layer providing perfect control of the etch profile of the wafer through-holes in combination with a remarkably improved etch uniformity across the wafer. Excellent through-hole insulation is provided through...

  16. Fundamentals of figure control and fracture-'free' finishing for high aspect ratio laser optics

    Energy Technology Data Exchange (ETDEWEB)

    Suratwala, Tayyab [Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)

    2014-10-01

    The high level objectives of the this work were to: 1) scientifically understand critical phenomena affecting the surface figure during full aperture finishing; 2) utilize these fundamentals to more deterministically control the surface figure during finishing; 3) successfully polish under rogue particle-‘free’ environments during polishing by understanding/preventing key sources of rogue particles.

  17. Effect of ac electrodeposition conditions on the growth of high aspect ratio copper nanowires in porous aluminum oxide templates.

    Science.gov (United States)

    Gerein, Nathan J; Haber, Joel A

    2005-09-22

    The effect of several deposition parameters on the uniformity of copper electrodeposition through the alumina barrier layer into porous aluminum oxide templates grown in sulfuric or oxalic acid was systematically investigated. A fractional factorial design of experiment was conducted to find suitable deposition conditions among the variables: frequency, voltage, pulsed or continuous deposition, electrolyte concentration, and barrier layer thinning voltage. Continuous ac sine wave deposition conditions yielded excellent uniformity of pore-filling but damaged the porous aluminum oxide templates when deposition was continued to grow bulk copper on the surface. Pulsed electrodeposition yielded comparable uniformity of pore-filling and no damage to the porous aluminum oxide templates, even when bulk copper was deposited on them. Further optimization of pulsed deposition conditions was accomplished by comparing square and sine waveforms and pulse polarity. Pulsed square waveforms produced better pore-filling than pulsed sine waveforms. For sine wave depositions, the oxidative/reductive pulse polarity was more efficient than the commonly used reductive/oxidative pulse polarity. For square wave depositions into sulfuric acid grown pores, the reductive/oxidative pulse polarity produces more uniform pore-filling, likely as a result of enhanced resonant tunneling through the barrier layer and reoxidation of copper in faster filling pores.

  18. Opportunities for high aspect ratio micro-electro-magnetic-mechanical systems (HAR-MEMMS) at Lawrence Berkeley Laboratory

    Energy Technology Data Exchange (ETDEWEB)

    Hunter, S. [ed.

    1993-10-01

    This report contains viewgraphs on the following topics: Opportunities for HAR-MEMMS at LBL; Industrial Needs and Opportunities; Deep Etch X-ray Lithography; MEMS Activities at BSAC; DNA Amplification with Microfabricated Reaction Chamber; Electrochemistry Research at LBL; MEMS Activities at LLNL; Space Microsensors and Microinstruments; The Advanced Light Source; Institute for Micromaching; IBM MEMS Interests; and Technology Transfer Opportunities at LBL.

  19. Functionalized Nano-Film Microchannel Plate: A Single High Aspect Ratio Device for High Resolution, Low Noise Astronomical Imaging Project

    Data.gov (United States)

    National Aeronautics and Space Administration — The proposed innovation is to apply proven nano-film technology to enable Microchannel plate (MCP) devices to be manufactured on a range of insulating substrates and...

  20. Functionalized Nano-Film Microchannel Plate: A Single High Aspect Ratio Device for High Resolution, Low Noise Astronomical Imaging Project

    Data.gov (United States)

    National Aeronautics and Space Administration — Atomic layer deposited functional nano-film technology is used to manufacture Microchannel plate (MCP) devices capable of high gain / low ion feedback operation, on...

  1. Real time ablation rate measurement during high aspect-ratio hole drilling with a 120-ps fiber laser

    National Research Council Canada - National Science Library

    Mezzapesa, Francesco P; Sibillano, Teresa; Di Niso, Francesca; Ancona, Antonio; Lugarà, Pietro M; Dabbicco, Maurizio; Scamarcio, Gaetano

    2012-01-01

    .... The time dependence of the laser ablation process within the depth of aluminum and stainless steel targets has been investigated to study the evolution of the material removal rate in high aspect...

  2. Silicon germanium as a novel mask for silicon deep reactive ion etching

    KAUST Repository

    Serry, Mohamed Y.

    2013-10-01

    This paper reports on the use of p-type polycrystalline silicon germanium (poly-Si1-xGex) thin films as a new masking material for the cryogenic deep reactive ion etching (DRIE) of silicon. We investigated the etching behavior of various poly-Si1-xGex:B (0silicon, silicon oxide, and photoresist was determined at different etching temperatures, ICP and RF powers, and SF6 to O2 ratios. The study demonstrates that the etching selectivity of the SiGe mask for silicon depends strongly on three factors: Ge content; boron concentration; and etching temperature. Compared to conventional SiO2 and SiN masks, the proposed SiGe masking material exhibited several advantages, including high etching selectivity to silicon (>1:800). Furthermore, the SiGe mask was etched in SF6/O2 plasma at temperatures ≥ - 80°C and at rates exceeding 8 μm/min (i.e., more than 37 times faster than SiO2 or SiN masks). Because of the chemical and thermodynamic stability of the SiGe film as well as the electronic properties of the mask, it was possible to deposit the proposed film at CMOS backend compatible temperatures. The paper also confirms that the mask can easily be dry-removed after the process with high etching-rate by controlling the ICP and RF power and the SF6 to O2 ratios, and without affecting the underlying silicon substrate. Using low ICP and RF power, elevated temperatures (i.e., > - 80°C), and an adjusted O2:SF6 ratio (i.e., ~6%), we were able to etch away the SiGe mask without adversely affecting the final profile. Ultimately, we were able to develop deep silicon- trenches with high aspect ratio etching straight profiles. © 1992-2012 IEEE.

  3. Fabrication of open-top microchannel plate using deep X-ray exposure mask made with silicon on insulator substrate

    CERN Document Server

    Fujimura, T; Etoh, S I; Hattori, R; Kuroki, Y; Chang, S S

    2003-01-01

    We propose a high-aspect-ratio open-top microchannel plate structure. This type of microchannel plate has many advantages in electrophoresis. The plate was fabricated by deep X-ray lithography using synchrotron radiation (SR) light and the chemical wet etching process. A deep X-ray exposure mask was fabricated with a silicon on insulator (SOI) substrate. The patterned Si microstructure was micromachined into a thin Si membrane and a thick Au X-ray absorber was embedded in it by electroplating. A plastic material, polymethylmethacrylate (PMMA) was used for the plate substrate. For reduction of the exposure time and high-aspect-ratio fast wet development, the fabrication condition was optimized with respect to not the exposure dose but to the PMMA mean molecular weight (M.W.) changing after deep X-ray exposure as measured by gel permeation chromatography (GPC). Decrement of the PMMA M.W. and increment of the wet developer temperature accelerated the etching rate. Under optimized fabrication conditions, a microc...

  4. Black silicon: substrate for laser 3D micro/nano-polymerization.

    Science.gov (United States)

    Žukauskas, Albertas; Malinauskas, Mangirdas; Kadys, Arūnas; Gervinskas, Gediminas; Seniutinas, Gediminas; Kandasamy, Sasikaran; Juodkazis, Saulius

    2013-03-25

    We demonstrate that black silicon (b-Si) made by dry plasma etching is a promising substrate for laser three-dimensional (3D) micro/nano-polymerization. High aspect ratio Si-needles, working as sacrificial support structures, have flexibility required to relax interface stresses between substrate and the polymerized micro-/nano- objects. Surface of b-Si can be made electrically conductive by metal deposition and, at the same time, can preserve low optical reflectivity beneficial for polymerization by direct laser writing. 3D laser polymerization usually performed at the irradiation conditions close to the dielectric breakdown is possible on non-reflective and not metallic surfaces. Here we show that low reflectivity and high metallic conductivity are not counter- exclusive properties for laser polymerization. Electrical conductivity of substrate and its permeability in liquids are promising for bio- and electroplating applications.

  5. Study of the roughness in a photoresist masked, isotropic, SF6-based ICP silicon etch

    DEFF Research Database (Denmark)

    Larsen, Kristian Pontoppidan; Petersen, Dirch Hjorth; Hansen, Ole

    2006-01-01

    In this paper we study the etching behavior and the resulting roughness in photoresist-masked isotropic silicon plasma etch performed in an inductively coupled plasma (ICP) etcher using SF6. We report detailed observations of the resulting roughness for various etching parameters, covering......: pressure from 2.5 to 70 mTorr, SF6 flow rate from 50 to 300 sccm, platen power from 0 to 16 W, and ICP power from 1000 to 3000 W. Etch processes with a normalized roughness below 0.005 were found at low pressure, p = 10 mTorr, while larger normalized roughness, above 0.02, occurred at higher pressures, p...... = 40 - 70 mTorr. Here the normalized roughness is the ratio of the roughness amplitude to the etch depth. The rough etching processes showed characteristic high-aspect-ratio and crystal-orientation-dependent surface morphology. The temporal evolution of this roughness was studied, and observations...

  6. Conformal doping of topographic silicon structures using a radial line slot antenna plasma source

    Science.gov (United States)

    Ueda, Hirokazu; Ventzek, Peter L. G.; Oka, Masahiro; Horigome, Masahiro; Kobayashi, Yuuki; Sugimoto, Yasuhiro; Nozawa, Toshihisa; Kawakami, Satoru

    2014-06-01

    Fin extension doping for 10 nm front end of line technology requires ultra-shallow high dose conformal doping. In this paper, we demonstrate a new radial line slot antenna plasma source based doping process that meets these requirements. Critical to reaching true conformality while maintaining fin integrity is that the ion energy be low and controllable, while the dose absorption is self-limited. The saturated dopant later is rendered conformal by concurrent amorphization and dopant containing capping layer deposition followed by stabilization anneal. Dopant segregation assists in driving dopants from the capping layer into the sub silicon surface. Very high resolution transmission electron microscopy-Energy Dispersive X-ray spectroscopy, used to prove true conformality, was achieved. We demonstrate these results using an n-type arsenic based plasma doping process on 10 to 40 nm high aspect ratio fins structures. The results are discussed in terms of the different types of clusters that form during the plasma doping process.

  7. Label-free optical detection of cells grown in 3D silicon microstructures.

    Science.gov (United States)

    Merlo, Sabina; Carpignano, Francesca; Silva, Gloria; Aredia, Francesca; Scovassi, A Ivana; Mazzini, Giuliano; Surdo, Salvatore; Barillaro, Giuseppe

    2013-08-21

    We demonstrate high aspect-ratio photonic crystals that could serve as three-dimensional (3D) microincubators for cell culture and also provide label-free optical detection of the cells. The investigated microstructures, fabricated by electrochemical micromachining of standard silicon wafers, consist of periodic arrays of silicon walls separated by narrow deeply etched air-gaps (50 μm high and 5 μm wide) and feature the typical spectral properties of photonic crystals in the wavelength range 1.0-1.7 μm: their spectral reflectivity is characterized by wavelength regions where reflectivity is high (photonic bandgaps), separated by narrow wavelength regions where reflectivity is very low. In this work, we show that the presence of cells, grown inside the gaps, strongly affects light propagation across the photonic crystal and, therefore, its spectral reflectivity. Exploiting a label-free optical detection method, based on a fiberoptic setup, we are able to probe the extension of cells adherent to the vertical silicon walls with a non-invasive direct testing. In particular, the intensity ratio at two wavelengths is the experimental parameter that can be well correlated to the cell spreading on the silicon wall inside the gaps.

  8. Improved Thermal Property of a Multilayered Graphite Nanoplatelets Filled Silicone Resin Composite

    Science.gov (United States)

    Lin, Jin; Zhang, Haiyan; Tang, Muyao; Tu, Wenying; Zhang, Xiubin

    2015-02-01

    We produced graphite nanoplatelets (GNP)/silicone resin composites at various loadings. The utilized GNPs were characterized by two-dimensional structure with high aspect ratio (~1810), and the GNP with approximately 10-30 nm thickness and 10-50 µm in length evenly dispersed throughout the resin matrix, which enables that GNPs effectively act as thermally conductive medium, thus contributed considerably to the formation of an efficient three-dimensional network for heat flow. The thermal conductivities of 5, 10, 15, and 20 wt.% GNP composite were 0.35, 1.02, 1.32, and 2.01 W/(m K), and were ca. 0.9, 4.7, 6.3, and 10.2 times higher than that of silicone resin at room temperature, respectively. The thermal conductivity decreased with elevated temperature in 25-200 °C, which was reminiscent at higher loading. Differential scanning calorimeter analysis showed that GNP addition increased the curing temperature of silicone resin from 90 to 119 °C, probably by hindering the free movement (mobility) of the silicone chains. The result showed that the GNP not only reduced the CTE but also improved the thermal stability of composite simultaneously.

  9. Development of a miniature silicon wafer fuel cell using L-ascorbic acid as fuel

    Institute of Scientific and Technical Information of China (English)

    Jian WO; Zhi-yong XIAO; Yi-bin YING; Philip C.H. CHAN

    2008-01-01

    In the current studies a miniature silicon wafer fuel cell (FC) using L-ascorbic acid as fuel was developed, The cell employs L-ascorbic acid and air as reactants and a thin polymer electrolyte as a separator. Inductively coupled plasma (ICP) silicon etching was employed to fabricate high aspect-ratio columns on the silicon substrate to increase the surface area. A thin platinum layer deposited directly on the silicon surface by the sputtering was used as the catalyst layer for L-ascorbic acid electro-oxidation.Cyclic voltammetry shows that the oxidation of L-ascorbic acid on the sputtered platinum layer is irreversible and that the onset potentials for the oxidation of L-ascorbic acid are from 0.27 V to 0.35 V versus an Ag/AgCI reference electrode. It is found that at the room temperature, with 1 mol/L L-ascorbic acid/PBS (phosphate buffered solution) solution pumped to the anode at 1 ml/min flow rate and air spontaneously diffusing to the cathode as the oxidant, the maximum output power density of the cell was 1.95m W/cm2 at a current density of 10 mA/cm2.

  10. On-line preconcentration system using a microcolumn packed with Alizarin Red S-modified alumina for zinc determination by flame atomic absorption spectrometry

    Directory of Open Access Journals (Sweden)

    A.M. Haji Shabani

    2009-01-01

    Full Text Available A simple and sensitive on-line flow injection system for determination of zinc with FAAS has been described. The method is based on the separation and preconcentration of zinc on a microcolumn of immobilized Alizarin Red S on alumina. The adsorbed analyte is then eluted with 250 µL of nitric acid (1 mol L-1 and is transported to flame atomic absorption spectrometer for quantification. The effect of pH, sample and eluent flow rates and presence of various cations and anions on the retention of zinc was investigated. The sorption of zinc was quantitative in the pH range of 5.5-8.5. For a sample volume of 25 mL an enrichment factor of 144 and a detection limit (3S of 0.2 µg L-1 was obtained. The precision (RSD, n=7 was 3.0% at the 20 µg L-1 level. The developed system was successfully applied to the determination of zinc in water samples, hair, urine and saliva.

  11. Controlled synthesis of uniform BiVO4 microcolumns and advanced visible-light-driven photocatalytic activity for the degradation of metronidazole-contained wastewater.

    Science.gov (United States)

    Yu, Chongfei; Dong, Shuying; Feng, Jinglan; Sun, Jingyu; Hu, Limin; Li, Yukun; Sun, Jianhui

    2014-02-01

    Well-defined, uniform bismuth vanadate (BiVO4) microcolumns were synthesized through a refined hydrothermal route. During the fabrication process, a detailed orthogonal design on the synthetic conditions was performed, aiming to optimize the experimental parameters to produce BiVO4 materials (BiVO4 (Opt.)) with the most prominent visible-light-driven photocatalytic efficiency, where the catalytic activities of the synthesized materials were evaluated via the decolorization of methylene blue under visible light irradiation. The BiVO4 (Opt.) were then targetedly produced according to the determined optimal conditions and well characterized by X-ray diffraction, scanning electron microscopy, transmission electron microscopy, ultraviolet and visible diffuse-reflectance spectroscopy and photoluminescence spectroscopy. Compared with the commercial P25-TiO2 photocatalysts, the as-synthesized BiVO4 (Opt.) displayed superior visible-light-driven photocatalytic activities for the degradation of metronidazole-contained wastewater with the presence of H2O2. The degradation efficiency of metronidazole reached up to 70 % within 180 min, leading to a brief speculation on the possibly major steps of the visible-light-driven photocatalytic process. The current study provides a distinctive route to design novel shaped BiVO4 architectures with advanced photocatalytic capacities for the treatment of organic pollutants in the aqueous environment.

  12. Study on the Flow Injection Micro-Column Pre-Separation System Coupled With High Performance Liquid Chromatography for the Determination of Ecdysterone in Traditional Chinese Medicine

    Institute of Scientific and Technical Information of China (English)

    2000-01-01

    A flow injection (FI) micro-column system coupled with high performance liquid chromatography (HPLC) was proposed for the pre-separation and determination of active organic component (ecdysterone) in traditional Chinese medicine, Loulu. The factors influencing separation performance were investigated and optimized. Under the optimal conditions, the contents of ecdysterone in Loulu were determined by HPLC system using MeOH-H20 (40 : 60,V/V) as the mobile phase at a flow rate of 1.0 mL/min. The calibration curve was linear in the range of 0. 5~100 mg/L of ecdysterone concentrations. The detection limit of the analyte was 0. 11 μmoi/L(3σ) with a precision of 0. 38% RSD (n=7, c=10. 0 mg/L). The average recovery of the method was 98.7%. The proposed method has been applied to determine ecdysterone in practical samples, and the determined values by both external standard method and standard addition method were in good agreement. Compared to the traditional solid extraction method, the system proposed has the advantages of simple procedure, good reproducibility, minimum volume requirement, reduction of matrix interference and iow contamination risk.

  13. Fabrication and characterization of high performance AIGaN/GaN HEMTs on sapphire with silicon nitride passivation

    Institute of Scientific and Technical Information of China (English)

    Zhang Renping; Yan Wei; Wang Xiaoliang; Yang Fuhua

    2011-01-01

    AIGaN/GaN high electron mobility transistors (HEMTs) with high performance were fabricated and characterized. A variety of techniques were used to improve device performance, such as AIN interlayer, silicon nitride passivation, high aspect ratio T-shaped gate, Iow resistance ohmic contact and short drain-source distance.DC and RF performances of as-fabricated HEMTs were characterized by utilizing a semiconductor characterization system and a vector network analyzer, respectively. As-fabricated devices exhibited a maximum drain current density of 1.41 A/mm and a maximum peak extrinsic transconductance of 317 mS/mm. The obtained current density is larger than those reported in the literature to date, implemented with a domestic wafer and processes. Furthermore, a unity current gain cut-off frequency of 74.3 GHz and a maximum oscillation frequency of 112.4 GHz were obtained on a device with an 80 nm gate length.

  14. Silicon spintronics.

    Science.gov (United States)

    Jansen, Ron

    2012-04-23

    Worldwide efforts are underway to integrate semiconductors and magnetic materials, aiming to create a revolutionary and energy-efficient information technology in which digital data are encoded in the spin of electrons. Implementing spin functionality in silicon, the mainstream semiconductor, is vital to establish a spin-based electronics with potential to change information technology beyond imagination. Can silicon spintronics live up to the expectation? Remarkable advances in the creation and control of spin polarization in silicon suggest so. Here, I review the key developments and achievements, and describe the building blocks of silicon spintronics. Unexpected and puzzling results are discussed, and open issues and challenges identified. More surprises lie ahead as silicon spintronics comes of age.

  15. A study of SU-8 photoresist in deep trenches for silicon-embedded microinductors

    Science.gov (United States)

    Laforge, Elias; Rabot, Caroline; Wang, Ningning; Pavlovic, Zoran; McCloskey, Paul; O'Mathúna, Cian

    2016-10-01

    Epoxy-based resist SU-8 is widely used in the development and fabrication of high-aspect-ratio (HAR) MEMS structures. It has proven to be a suitable photoresist combining thick layer coating and good adhesion on silicon substrates as well as possessing good mechanical and chemical stability. However, the trend towards minia- turization and increasing packaging density has pushed the demand for challenging micro-machining processes. As an example, a novel design of a MEMS microinductor requires a dielectric permanent layer coated in deep silicon trenches in order to insulate copper windings from the magnetic material deposited in these trenches. This requires the development of a photolithography process which enables the coating of a void-free layer filling the trenches. In this paper, the use of thick SU-8 photoresist for filling deep silicon trenches is investigated. Different SU-8 formulations are analyzed, processed and results are compared. As a result, an optimized process is developed to achieve void-free filled trenches and a uniform planar layer above them, with near vertical sidewall patterns.

  16. Periodic arrays of deep nanopores made in silicon with reactive ion etching and deep UV lithography

    Energy Technology Data Exchange (ETDEWEB)

    Woldering, Leon A; Tjerkstra, R Willem; Vos, Willem L [Complex Photonic Systems (COPS), MESA Institute for Nanotechnology and Department of Science and Technology, University of Twente, PO Box 217, NL-7500 AE Enschede (Netherlands); Jansen, Henri V [Transducers Science and Technology (TST), MESA Institute for Nanotechnology and Department of Electrical Engineering, Mathematics and Computer Science, University of Twente, PO Box 217, NL-7500 AE Enschede (Netherlands); Setija, Irwan D [ASML Netherlands B V, De Run 6501, NL-5504 DR Veldhoven (Netherlands)], E-mail: l.a.woldering@utwente.nl

    2008-04-09

    We report on the fabrication of periodic arrays of deep nanopores with high aspect ratios in crystalline silicon. The radii and pitches of the pores were defined in a chromium mask by means of deep UV scan and step technology. The pores were etched with a reactive ion etching process with SF{sub 6}, optimized for the formation of deep nanopores. We have realized structures with pitches between 440 and 750 nm, pore diameters between 310 and 515 nm, and depth to diameter aspect ratios up to 16. To the best of our knowledge, this is the highest aspect ratio ever reported for arrays of nanopores in silicon made with a reactive ion etching process. Our experimental results show that the etching rate of the nanopores is aspect-ratio-dependent, and is mostly influenced by the angular distribution of the etching ions. Furthermore we show both experimentally and theoretically that, for sub-micrometer structures, reducing the sidewall erosion is the best way to maximize the aspect ratio of the pores. Our structures have potential applications in chemical sensors, in the control of liquid wetting of surfaces, and as capacitors in high-frequency electronics. We demonstrate by means of optical reflectivity that our high-quality structures are very well suited as photonic crystals. Since the process studied is compatible with existing CMOS semiconductor fabrication, it allows for the incorporation of the etched arrays in silicon chips.

  17. Fabrication of a Silicon Backshort Assembly for Waveguide-Coupled Superconducting Detectors

    Science.gov (United States)

    Crowe, Erik J.; Bennett, Charles L.; Chuss, David T.; Denis, Kevin L.; Eimer, Joseph; Lourie, Nathan; Marriage, Tobias; Moseley, Samuel H.; Rostem, Karwan; Stevenson, Thomas R.; Towner, Deborah; U-Yen, Kongpop

    2012-01-01

    The Cosmology Large Angular Scale Surveyor (CLASS) is a ground-based instrument that will measure the polarization of the cosmic microwave background to search for evidence for gravitational waves from a posited epoch of inflation early in the Universe s history. This measurement will require integration of superconducting transition-edge sensors with microwave waveguide inputs with excellent control of systematic errors, such as unwanted coupling to stray signals at frequencies outside of a precisely defined microwave band. To address these needs we present work on the fabrication of micromachined silicon, producing conductive quarter-wave backshort assemblies for the CLASS 40 GHz focal plane. Each 40 GHz backshort assembly consists of three degeneratively doped silicon wafers. Two spacer wafers are micromachined with through-wafer vias to provide a 2.04 mm long square waveguide delay section. The third wafer terminates the waveguide delay in a short. The three wafers are bonded at the wafer level by Au-Au thermal compression bonding then aligned and flip chip bonded to the CLASS detector at the chip level. The micromachining techniques used have been optimized to create high aspect ratio waveguides, silicon pillars, and relief trenches with the goal of providing improved out of band signal rejection. We will discuss the fabrication of integrated CLASS superconducting detector chips with the quarter-wave backshort assemblies.

  18. Vertically aligned CNT-Cu nano-composite material for stacked through-silicon-via interconnects.

    Science.gov (United States)

    Sun, Shuangxi; Mu, Wei; Edwards, Michael; Mencarelli, Davide; Pierantoni, Luca; Fu, Yifeng; Jeppson, Kjell; Liu, Johan

    2016-08-19

    For future miniaturization of electronic systems using 3D chip stacking, new fine-pitch materials for through-silicon-via (TSV) applications are likely required. In this paper, we propose a novel carbon nanotube (CNT)/copper nanocomposite material consisting of high aspect ratio, vertically aligned CNT bundles coated with copper. These bundles, consisting of hundreds of tiny CNTs, were uniformly coated by copper through electroplating, and aspect ratios as high as 300:1 were obtained. The resistivity of this nanomaterial was found to be as low as ∼10(-8) Ω m, which is of the same order of magnitude as the resistivity of copper, and its temperature coefficient was found to be only half of that of pure copper. The main advantage of the composite TSV nanomaterial is that its coefficient of thermal expansion (CTE) is similar to that of silicon, a key reliability factor. A finite element model was set up to demonstrate the reliability of this composite material and thermal cycle simulations predicted very promising results. In conclusion, this composite nanomaterial appears to be a very promising material for future 3D TSV applications offering both a low resistivity and a low CTE similar to that of silicon.

  19. Complex microstructure fabrication by integrating silicon anisotropic etching and UV-LIGA technology

    Institute of Scientific and Technical Information of China (English)

    Jing Xiangmeng; Chen Di; Huang Chuang; Chen Xiang; Liu Jingquan; Zhu Jun

    2007-01-01

    A fabrication method which integrates silicon anisotropic etching micromachining with UV-LIGA technology to make complex microstructures is presented.This proposod combined process enables the fabrication of high-aspect-ratio and three-dimensional(3D)microstmctures,which cannot be fabricated by silicon bulk micromachining or UV-LIGA alone.To demonstrate this combined method.the 100μm thick SU-8 micro gears were fabricated on the silicon convex square structure.which is 100μm×100μm×80μm in dimension.In the subsequent micro hot embossing process,a novel type of plastics polyethylene terephtalate glycol(PETG)Was tried for use.Through optimizing process parameters,PETG shows the potential of being used as plastic replica in micro-electro-mechanical system(MEMS).This fabrication technology provides a new option for the increasing need of functionality,quality and economy of MEMS.

  20. Coupling on-line preconcentration by ion-exchange with ETAAS. A novel flow injection approach based on the use of a renewable microcolumn as demonstrated for the determination of nickel in environmental and biological samples

    DEFF Research Database (Denmark)

    Wang, Jianhua; Hansen, Elo Harald

    2000-01-01

    A novel way of exploiting flow injection/sequential injection (FIA/SIA) on-line ion-exchange preconcentration with detection by electrothermal atomic absorption spectrometry (ETAAS) is described and demonstrated for the determination of trace-levels of nickel. Based on the use of a renewable...... microcolumn incorporated within an integrated micro FI-system, the column is loaded with a defined volume of small beads of an SP Sephadex C-25 cation-exchange resin and subsequently exposed to a metered amount of sample solution. However, instead of eluting the retained analyte from the organic ion-exchange...

  1. Automated sequential injection-microcolumn approach with on-line flame atomic absorption spectrometric detection for implementing metal fractionation schemes of homogeneous and non-homogeneous solid samples of environmental interest

    DEFF Research Database (Denmark)

    Chomchoei, Roongrat; Miró, Manuel; Hansen, Elo Harald

    2005-01-01

    An automated sequential injection (SI) system incorporating a dual-conical microcolumn is proposed as a versatile approach for the accommodation of both single and sequential extraction schemes for metal fractionation of solid samples of environmental concern. Coupled to flame atomic absorption...... spectrometric detection and used for the determination of Cu as a model analyte, the potentials of this novel hyphenated approach are demonstrated by the ability of handling up to 300 mg sample of a nonhomogeneous sewage amended soil (viz., CRM 483). The three steps of the endorsed Standards, Measurements...

  2. A new cell-selective three-dimensional microincubator based on silicon photonic crystals.

    Directory of Open Access Journals (Sweden)

    Francesca Carpignano

    Full Text Available In this work, we show that vertical, high aspect-ratio (HAR photonic crystals (PhCs, consisting of periodic arrays of 5 µm wide gaps with depth of 50 µm separated by 3 µm thick silicon walls, fabricated by electrochemical micromachining, can be used as three-dimensional microincubators, allowing cell lines to be selectively grown into the gaps. Silicon micromachined dice incorporating regions with different surface profiles, namely flat silicon and deeply etched PhC, were used as microincubators for culturing adherent cell lines with different morphology and adhesion properties. We extensively investigated and compared the proliferative behavior on HAR PhCs of eight human cell models, with different origins, such as the epithelial (SW613-B3; HeLa; SW480; HCT116; HT29 and the mesenchymal (MRC-5V1; CF; HT1080. We also verified the contribution of cell sedimentation into the silicon gaps. Fluorescence microscopy analysis highlights that only cell lines that exhibit, in the tested culture condition, the behavior typical of the mesenchymal phenotype are able to penetrate into the gaps of the PhC, extending their body deeply in the narrow gaps between adjacent silicon walls, and to grow adherent to the vertical surfaces of silicon. Results reported in this work, confirmed in various experiments, strongly support our statement that such three-dimensional microstructures have selection capabilities with regard to the cell lines that can actively populate the narrow gaps. Cells with a mesenchymal phenotype could be exploited in the next future as bioreceptors, in combination with HAR PhC optical transducers, e.g., for label-free optical detection of cellular activities involving changes in cell adhesion and/or morphology (e.g., apoptosis in a three-dimensional microenvironment.

  3. One step lithography-less silicon nanomanufacturing for low cost high-efficiency solar cell production

    Science.gov (United States)

    Chen, Yi; Liu, Logan

    2014-03-01

    To improve light absorption, previously various antireflection material layers were created on solar wafer surface including multilayer dielectric film, nanoparticle sludges, microtextures, noble metal plasmonic nanoparticles and 3D silicon nanostructure arrays. All of these approaches involve nanoscale prepatterning, surface-area-sensitive assembly processes or extreme fabrication conditions; therefore, they are often limited by the associated high cost and low yield as well as the consequent industry incompatibility. In comparison, our nanomanufacturing, an unique synchronized and simultaneous top-down and bottom-up nanofabrication approach called simultaneous plasma enhanced reactive ion synthesis and etching (SPERISE), offers a better antireflection solution along with the potential to increase p-n junction surface area. High density and high aspect ratio anechoic nanocone arrays are repeatedly and reliably created on the entire surface of single and poly crystalline silicon wafers as well as amorphous silicon thin films within 5 minutes under room temperature. The nanocone surface had lower than 5% reflection over the entire solar spectrum and a desirable omnidirectional absorption property. Using the nanotextured solar wafer, a 156mm × 156mm 18.1%-efficient black silicon solar cell was fabricated, which was an 18.3% enhancement over the cell fabricated by standard industrial processes. This process also reduces silicon loss during the texturing step and enables tighter process control by creating more uniform surface structures. Considering all the above advantages, the demonstrated nanomanufacturing process can be readily translated into current industrial silicon solar cell fabrication lines to replace the costly and ineffective wet chemical texturing and antireflective coatings.

  4. Porous silicon for micro-sized fuel cell reformer units

    Energy Technology Data Exchange (ETDEWEB)

    Presting, H.; Konle, J.; Starkov, V.; Vyatkin, A.; Koenig, U

    2004-04-25

    Randomly, self-organized and ordered anodically etched porous silicon with pore sizes down to hundred nanometers have been fabricated for a variety of automotive applications which range from carrier structures in fuel cell technology up to shower heads for fuel injection in combustion engines. The porous wafers are produced by deep anodic etching which is a very effective and cheap fabrication method compatible to standard Si CMOS fabrication technology. The density of nano- (and micro-) pores can be varied in a wide range by choice of substrate doping level and appropriate electrolyte solution. Surface enlargement up to a factor of 1000 can be achieved [J. Electrochem. Soc. 149 (1) (2002) G70]. After deposition of a catalyst on the inner surface of the pores these structures can be used as an effective catalytic reaction area for the injected hydrocarbons in a micro-steam reformer unit with a small reaction volume. In addition deep anodic etching (DAE) of a pinhole array with very high aspect ratios is demonstrated using a pre-patterned inverted pyramidal array which is produced by lithography and subsequent wet chemical potassium hydroxide (KOH) etch. The structures can also be used as carrier structures for the hydrogen separation membrane of the reforming gas in a reformer unit when a thin layer of palladium is evaporated prior to the anodic etching of the pores. The noble metal foil serves as anode contact during the etch as well as hydrogen separating membrane of the device.

  5. Cellular uptake and dynamics of unlabeled freestanding silicon nanowires.

    Science.gov (United States)

    Zimmerman, John F; Parameswaran, Ramya; Murray, Graeme; Wang, Yucai; Burke, Michael; Tian, Bozhi

    2016-12-01

    The ability to seamlessly merge electronic devices with biological systems at the cellular length scale is an exciting prospect for exploring new fundamental cell biology and in designing next-generation therapeutic devices. Semiconductor nanowires are well suited for achieving this goal because of their intrinsic size and wide range of possible configurations. However, current studies have focused primarily on delivering substrate-bound nanowire devices through mechanical abrasion or electroporation, with these bulkier substrates negating many of the inherent benefits of using nanoscale materials. To improve on this, an important next step is learning how to distribute these devices in a drug-like fashion, where cells can naturally uptake and incorporate these electronic components, allowing for truly noninvasive device integration. We show that silicon nanowires (SiNWs) can potentially be used as such a system, demonstrating that label-free SiNWs can be internalized in multiple cell lines (96% uptake rate), undergoing an active "burst-like" transport process. Our results show that, rather than through exogenous manipulation, SiNWs are internalized primarily through an endogenous phagocytosis pathway, allowing cellular integration of these materials. To study this behavior, we have developed a robust set of methodologies for quantitatively examining high-aspect ratio nanowire-cell interactions in a time-dependent manner on both single-cell and ensemble levels. This approach represents one of the first dynamic studies of semiconductor nanowire internalization and offers valuable insight into designing devices for biomolecule delivery, intracellular sensing, and photoresponsive therapies.

  6. Fabrication of silicon nanopillar arrays by cesium chloride self-assembly and wet electrochemical etching for solar cell

    Science.gov (United States)

    Liu, Jing; Zhang, Xinshuai; Dong, Gangqiang; Liao, Yuanxun; Wang, Bo; Zhang, Tianchong; Yi, Futing

    2014-01-01

    A simple technology with cesium chloride (CsCl) self-assembly lithography and wet electrochemical etching is introduced to fabricate the wafer scale, disordered, well-aligned, and high aspect ratio silicon nanopillars. The original nano structures of CsCl islands with diameters of 500-2000 nm are formed by self-assembly and used as template of lift-off for the nanoporous gold film for wet electrochemical etching as the catalyst in etching solution of HF and H2O2. The average diameter of silicon nanopillars is determined by the CsCl nanoislands with 500-2000 nm, and the height of silicon nanopillars is mainly determined by the etching time in etching solution with 3-12 μm. The aspect ratio can achieve to 60. The solar cells with different height nanopillars are made for the research of photovoltaic conversion efficiency (PCE). The reflectance of the nanopillars with different height is measured from the wavelength of 400 to 1000 nm and the 9 μm height silicon nanopillars has the lowest one which is below 3%. The PCE shows the highest value of 14.19% at the condition of 3 μm height nanopillars and 12.18% of planar one with the same fabrication process.

  7. Fabrication of Silicon Backshorts with Improved Out-of-Band Rejection for Waveguide-Coupled Superconducting Detectors

    Science.gov (United States)

    Crowe, Erik J.; Bennett, Charles L.; Chuss, David T.; Denis, Kevin L.; Eimer, Joseph; Lourie, Nathan; Marriage, Tobias; Moseley, Samuel H.; Rostem, Karwan; Stevenson, Thomas R.; Towner, Deborah; U-yen, Kongpop; Wollack, Edward J.

    2012-01-01

    The Cosmology Large Angular Scale Surveyor (CLASS) is a ground-based instrument that will measure the polarization of the cosmic microqave background to search for gravitational waves form a posited epoch of inflation early in the universe's history. This measurement will require integration of superconducting transition-edge sensors with microwave waveguide inputs with good conrol of systematic errors, such as unwanted coupling to stray signals at frequencies outside of a precisely defined microwave band. To address these needs we will present work on the fabrication of silicon quarter-wave backshorts for the CLASS 40GHz focal plane. The 40GHz backshort consists of three degeneratively doped silicon wafers. Two spacer wafers are micromachined with through wafer vins to provide a 2.0mm long square waveguide. The third wafer acts as the backshort cap. The three wafers are bonded at the wafer level by Au-Au thermal compression bonding then aligned and flip chip bonded to the CLASS detector at the chip level. The micromachining techniques used have been optimized to create high aspect ratio waveguides, silicon pillars, and relief trenches with the goal of providing improved out of band signal rejection. We will discuss the fabrication of integrated CLASS superconducting detectors with silicon quarter wave backshorts and present current measurement results.

  8. Preparation of Aligned Ultra-long and Diameter-controlled Silicon Oxide Nanotubes by Plasma Enhanced Chemical Vapor Deposition Using Electrospun PVP Nanofiber Template

    Directory of Open Access Journals (Sweden)

    Zhou Ming

    2009-01-01

    Full Text Available Abstract Well-aligned and suspended polyvinyl pyrrolidone (PVP nanofibers with 8 mm in length were obtained by electrospinning. Using the aligned suspended PVP nanofibers array as template, aligned ultra-long silicon oxide (SiOx nanotubes with very high aspect ratios have been prepared by plasma-enhanced chemical vapor deposition (PECVD process. The inner diameter (20–200 nm and wall thickness (12–90 nm of tubes were controlled, respectively, by baking the electrospun nanofibers and by coating time without sacrificing the orientation degree and the length of arrays. The micro-PL spectrum of SiOx nanotubes shows a strong blue–green emission with a peak at about 514 nm accompanied by two shoulders around 415 and 624 nm. The blue–green emission is caused by the defects in the nanotubes.

  9. An X band RF MEMS switch based on silicon-on-glass architecture

    Indian Academy of Sciences (India)

    M S Giridhar; Ashwini Jambhalikar; J John; R Islam; C L Nagendra; T K Alex

    2009-08-01

    Communication systems such as those used on satellite platforms demand high performance from individual components that make up the varoius systems and sub-systems. Switching and routing of RF signals between various modules is a routine and critical operation that determines the overall efficiency of the entire system. In this paper, we present the design and fabrication aspects of a direct contact RF MEMS switch designed to operate in the X band (8–12 GHz) with a target insertion of about 0·5 dB and isolation better than 30 dB. The actuation voltage is expected to be around 50 V. The die size is designed to be 3 mm (H) × 3 mm(W) × 2 mm(H). The switch is built from a low residual stress device layer of a highly conducting (0·005 Ohms-cm) silicon on insulator (SOI) wafer. After subsequent lithographic steps, the wafer is bonded to a Pyrex glass wafer which has been previously patterned with gold transmission lines and pull in electrodes. Being built from a single crystal silicon structure, the mechanical robustness of the actuator is much greater than the those in similar membrane-based devices. A 6 mask fabrication process utilizing Deep Reactive Ion Etching to achieve high aspect ratio stiction free structures was developed and implemented. Devices from the first fabrication run are being analysed in our laboratory.

  10. Silicon Spintronics

    NARCIS (Netherlands)

    Jansen, R.

    2008-01-01

    Integration of magnetism and mainstream semiconductor electronics could impact information technology in ways beyond imagination. A pivotal step is implementation of spin-based electronic functionality in silicon devices. Remarkable progress made during the last two years gives confidence that this

  11. Lithographically patterned silicon nanostructures on silicon substrates

    Energy Technology Data Exchange (ETDEWEB)

    Megouda, Nacera [Institut de Recherche Interdisciplinaire (IRI, USR 3078), Universite Lille1, Parc de la Haute Borne, 50 Avenue de Halley-BP 70478, 59658 Villeneuve d' Ascq and Institut d' Electronique, de Microelectronique et de Nanotechnologie (IEMN, CNRS-8520), Cite Scientifique, Avenue Poincare-B.P. 60069, 59652 Villeneuve d' Ascq (France); Faculte des Sciences, Universite Mouloud Mammeri, Tizi-Ouzou (Algeria); Unite de Developpement de la Technologie du Silicium (UDTS), 2 Bd. Frantz Fanon, B.P. 140 Alger-7 merveilles, Alger (Algeria); Piret, Gaeelle; Galopin, Elisabeth; Coffinier, Yannick [Institut de Recherche Interdisciplinaire (IRI, USR 3078), Universite Lille1, Parc de la Haute Borne, 50 Avenue de Halley-BP 70478, 59658 Villeneuve d' Ascq and Institut d' Electronique, de Microelectronique et de Nanotechnologie (IEMN, CNRS-8520), Cite Scientifique, Avenue Poincare-B.P. 60069, 59652 Villeneuve d' Ascq (France); Hadjersi, Toufik, E-mail: hadjersi@yahoo.com [Unite de Developpement de la Technologie du Silicium (UDTS), 2 Bd. Frantz Fanon, B.P. 140 Alger-7 merveilles, Alger (Algeria); Elkechai, Omar [Faculte des Sciences, Universite Mouloud Mammeri, Tizi-Ouzou (Algeria); and others

    2012-06-01

    The paper reports on controlled formation of silicon nanostructures patterns by the combination of optical lithography and metal-assisted chemical dissolution of crystalline silicon. First, a 20 nm-thick gold film was deposited onto hydrogen-terminated silicon substrate by thermal evaporation. Gold patterns (50 {mu}m Multiplication-Sign 50 {mu}m spaced by 20 {mu}m) were transferred onto the silicon wafer by means of photolithography. The etching process of crystalline silicon in HF/AgNO{sub 3} aqueous solution was studied as a function of the silicon resistivity, etching time and temperature. Controlled formation of silicon nanowire arrays in the unprotected areas was demonstrated for highly resistive silicon substrate, while silicon etching was observed on both gold protected and unprotected areas for moderately doped silicon. The resulting layers were characterized using scanning electron microscopy (SEM).

  12. Hyperthermal Pulsed-Laser Ablation Beams for Film Deposition and Surface Microstructural Engineering

    Energy Technology Data Exchange (ETDEWEB)

    Lowndes, D.H.

    1999-11-08

    This paper presents an overview of pulsed-laser ablation for film deposition and surface microstructure formation. By changing the ambient gas pressure from high vacuum to several Torr (several hundred Pa) and by selecting the pulsed-laser wavelength, the kinetic energy of ablated atoms/ions can be varied from several hundred eV down to {approximately}0.1 eV and films ranging from superhard to nanocrystalline may be deposited. Furthermore, cumulative (multi-pulse) irradiation of a semiconductor surface (e.g. silicon) in an oxidizing gas (0{sub 2}, SF{sub 6}) et atmospheric pressure can produce dense, self-organized arrays of high-aspect-ratio microcolumns or microcones. Thus, a wide range of materials synthesis and processing opportunities result from the hyperthermal flux and reactive growth conditions provided by pulsed-laser ablation.

  13. Study on Locally Confined Deposition of Si Nanocrystals in High-Aspect-Ratio Si Nano-Pillar Array for Nano-Electronic and Nano-Photonic Applications

    Science.gov (United States)

    2010-02-23

    the applied electric field on the SiOx, mox is the effective electron mass in the SiOx, m is the free electron mass, B is the barrier height at the...compared to other mechanisms. For example, a simulated direct tunneling current with mox /m ratio of 0.26, the barrier height of 3.8, the oxide thickness...transport path,[24] which is give by * 2 exp exp 1Bthermionic q qVJ A T kT kT               , (5) where A* = 4 pqk2m*/h3 = 120 ( mox

  14. Variable Deflection Response of Sensitive CNT-on-Fiber Artificial Hair Sensors from CNT Synthesis in High Aspect Ratio Microcavities (Postprint)

    Science.gov (United States)

    2015-04-01

    microstructures such as tailored hair shapes, micro-antennae, brushes, or filters . The CNT arrays are synthesized in a 1” diameter quartz tube furnace...Microstructure Growth,” ACS Nano, 8(6), 5799-5812 (2014). [17] P. B. Amama, C. L. Pint, L. McJilton et al., “Role of Water in Super Growth of Single...Garcia et al., “High-yield growth and morphology control of aligned carbon nanotubes on ceramic fibers for multifunctional enhancement of structural

  15. Influence of Alkyl Trimethyl Ammonium Bromides on Hydrothermal Formation of α-CaSO4·0.5H2O Whiskers with High Aspect Ratios

    Directory of Open Access Journals (Sweden)

    Ruosong Chen

    2017-01-01

    Full Text Available In this paper, the influence of alkyl trimethyl ammonium bromides (CnH2n+1(CH33NBr, n = 10, 12, 14, 16, 18, abbreviated as ATAB on the formation of alpha calcium sulfate hemihydrate (α-CaSO4·0.5H2O whiskers under a hydrothermal condition (135 °C, 3.0 h was analyzed. Specifically, it focuses on cetyl trimethyl ammonium bromide (C16H33(CH33NBr, abbreviated as CTAB. The rising CTAB concentration from 0 to 9.2 × 10−4 mol·L−1 led to the increase of the average aspect ratio of α-CaSO4·0.5H2O whiskers from 80 to 430, since the selective adsorption of CTAB on the negatively-charged side facets of the whiskers inhibited the growth of the whiskers along the direction normal to the lateral facets. The further increase of CTAB concentration above the critical micelle concentration (abbreviated as CMC showed little effect on the morphology of α-CaSO4·0.5H2O whiskers, considering that CTAB tended to form micelles instead of being adsorbed on the whisker surfaces. Similar phenomena were observed in other ATABs (n = 10, 12, 14, 18.

  16. 3-D Numerical Simulation and Analysis of Complex Fiber Geometry RaFC Materials with High Volume Fraction and High Aspect Ratio based on ABAQUS PYTHON

    Science.gov (United States)

    Jin, BoCheng

    2011-12-01

    Organic and inorganic fiber reinforced composites with innumerable fiber orientation distributions and fiber geometries are abundantly available in several natural and synthetic structures. Inorganic glass fiber composites have been introduced to numerous applications due to their economical fabrication and tailored structural properties. Numerical characterization of such composite material systems is necessitated due to their intrinsic statistical nature, which renders extensive experimentation prohibitively time consuming and costly. To predict various mechanical behavior and characterizations of Uni-Directional Fiber Composites (UDFC) and Random Fiber Composites (RaFC), we numerically developed Representative Volume Elements (RVE) with high accuracy and efficiency and with complex fiber geometric representations encountered in uni-directional and random fiber networks. In this thesis, the numerical simulations of unidirectional RaFC fiber strand RVE models (VF>70%) are first presented by programming in ABAQUS PYTHON. Secondly, when the cross sectional aspect ratios (AR) of the second phase fiber inclusions are not necessarily one, various types of RVE models with different cross sectional shape fibers are simulated and discussed. A modified random sequential absorption algorithm is applied to enhance the volume fraction number (VF) of the RVE, which the mechanical properties represents the composite material. Thirdly, based on a Spatial Segment Shortest Distance (SSSD) algorithm, a 3-Dimentional RaFC material RVE model is simulated in ABAQUS PYTHON with randomly oriented and distributed straight fibers of high fiber aspect ratio (AR=100:1) and volume fraction (VF=31.8%). Fourthly, the piecewise multi-segments fiber geometry is obtained in MATLAB environment by a modified SSSD algorithm. Finally, numerical methods including the polynomial curve fitting and piecewise quadratic and cubic B-spline interpolation are applied to optimize the RaFC fiber geometries. Based on the multi-segments fiber geometries and aforementioned techniques, smooth curved fiber geometries depicted by cubic B-spline polynomial interpolation are obtained and different types of RaFC RVEs with high fiber filament aspect ratio (AR>3000:1) and high RVE volume fraction (VF>40.29%) are simulated by ABAQUS scripting language PYTHON programming.

  17. Fabrication of high aspect ratio TiOsub>2sub> and Alsub>2sub>O>3sub> nanogratings by atomic layer deposition

    DEFF Research Database (Denmark)

    Shkondin, Evgeniy; Takayama, Osamu; Michael-Lindhard, Jonas

    2016-01-01

    The authors report on the fabrication of TiO2 and Al2O3 nanostructured gratings with an aspect ratio of up to 50. The gratings were made by a combination of atomic layer deposition (ALD) and dry etch techniques. The workflow included fabrication of a Si template using deep reactive ion etching...

  18. Transonic steady- and unsteady-pressure measurements on a high-aspect-ratio supercritical-wing model with oscillating control surfaces

    Science.gov (United States)

    Sandford, M. C.; Ricketts, R. H.; Cazier, F. W., Jr.

    1980-01-01

    A supercritical wing with an aspect ratio of 10.76 and with two trailing-edge oscillating control surfaces is described. The semispan wing is instrumented with 252 static orifices and 164 in situ dynamic-pressure gages for studying the effects of control-surface position and motion on steady- and unsteady-pressures at transonic speeds. Results from initial tests conducted in the Langley Transonic Dynamics Tunnel at two Reynolds numbers are presented in tabular form.

  19. Technological and material related challenges for large area, high aspect-ratio, near teradot/inch2 areal density and three-dimensional structuring of polyaniline.

    Science.gov (United States)

    Jedrasik, Piotr; Vlad, Alexandru; Södervall, Ulf

    2011-10-01

    In this manuscript we report on a newly developed technology for the nanoscale processing of the conducting polyaniline (PANI) with an unprecedented areal patterning order and density control exceeding 0.25 teradot/inch2. High resolution electron beam lithography was used to generate ordered 2D and 3D templates. A novel type of resist and dose-modulated 3D-electron beam lithography (RDM-3D-EBL), extensively exploiting the intrinsic properties of resist-electron beam interaction is detailed. Surface initiated and template confined aniline polymerization, through catalytic activity of metallic platinum, was then exploited to provide a genuine method for controlled nanoscale processing of polyaniline, a prototypical conjugated polymer that definitively settled the concept of synthetic metals. Using nanoscale polymerization reactors, ultimate resolution patterning and processing control of single polyaniline nanostructures was feasible. Aspects of the nanoscale polyaniline growth mechanism are discussed and the highly controllable, sub-picogram scale fabrication is emphasized. Near teradot/inch2 pattern transfer technology, complex 3D structuring and physico-chemical functionalization of polyaniline can be subsequently harnessed to build a large variety of architectures with potential for emerging optoelectronic technologies. The method is scalable, can be applied on virtually any type of flexible or rigid substrates and provides a generic approach for nanopatterning surfaces with functional polymers. Technological and material related fabrication challenges are detailed and discussed.

  20. Fractionation and Characterization of High Aspect Ratio Gold Nanorods Using Asymmetric-Flow Field Flow Fractionation and Single Particle Inductively Coupled Plasma Mass Spectrometry

    Directory of Open Access Journals (Sweden)

    Thao M. Nguyen

    2015-07-01

    Full Text Available Gold nanorods (GNRs are of particular interest for biomedical applications due to their unique size-dependent longitudinal surface plasmon resonance band in the visible to near-infrared. Purified GNRs are essential for the advancement of technologies based on these materials. Used in concert, asymmetric-flow field flow fractionation (A4F and single particle inductively coupled mass spectrometry (spICP-MS provide unique advantages for fractionating and analyzing the typically complex mixtures produced by common synthetic procedures. A4F fractions collected at specific elution times were analyzed off-line by spICP-MS. The individual particle masses were obtained by conversion of the ICP-MS pulse intensity for each detected particle event, using a defined calibration procedure. Size distributions were then derived by transforming particle mass to length assuming a fixed diameter. The resulting particle lengths correlated closely with ex situ transmission electron microscopy. In contrast to our previously reported observations on the fractionation of low-aspect ratio (AR GNRs (AR < 4, under optimal A4F separation conditions the results for high-AR GNRs of fixed diameter (≈20 nm suggest normal, rather than steric, mode elution (i.e., shorter rods with lower AR generally elute first. The relatively narrow populations in late eluting fractions suggest the method can be used to collect and analyze specific length fractions; it is feasible that A4F could be appropriately modified for industrial scale purification of GNRs.

  1. Catalytic Synthesis of Substrate-Free, Aligned and Tailored High Aspect Ratio Multiwall Carbon Nanotubes in an Ultrasonic Atomization Head CVD Reactor

    OpenAIRE

    Fahad Ali Rabbani; Zuhair Omar Malaibari; Muataz Ali Atieh; Ammar Jamie

    2016-01-01

    Chemical vapor deposition (CVD) method has proven its benchmark, over other methods, for the production of different types of carbon nanotubes (CNT) on commercial and lab scale. In this study, an injection vertical CVD reactor fitted with an ultrasonic atomization head was used in a pilot-plant scale (height 274 cm, radius 25 cm) for semicontinuous production of multiwall carbon nanotubes (MWCNTs). p-Xylene was used as a hydrocarbon precursor in which ferrocene was dissolved and provided the ...

  2. Fractionation and Characterization of High Aspect Ratio Gold Nanorods Using Asymmetric-Flow Field Flow Fractionation and Single Particle Inductively Coupled Plasma Mass Spectrometry

    OpenAIRE

    Nguyen, Thao M; Jingyu Liu; Vincent A. Hackley

    2015-01-01

    Gold nanorods (GNRs) are of particular interest for biomedical applications due to their unique size-dependent longitudinal surface plasmon resonance band in the visible to near-infrared. Purified GNRs are essential for the advancement of technologies based on these materials. Used in concert, asymmetric-flow field flow fractionation (A4F) and single particle inductively coupled mass spectrometry (spICP-MS) provide unique advantages for fractionating and analyzing the typically complex mixtur...

  3. Porous, one-dimensional and high aspect ratio nanofibric network of cobalt manganese oxide as a high performance material for aqueous and solid-state supercapacitor (2 V)

    Science.gov (United States)

    Bhagwan, Jai; Sivasankaran, V.; Yadav, K. L.; Sharma, Yogesh

    2016-09-01

    Porous nanofibric network of spinel CoMn2O4 (CMO) are fabricated by facile electrospinning process and characterized by XRD, BET, TGA, FTIR, FESEM, TEM, XPS techniques. CMO nanofibers are employed as supercapacitor electrode for first time which exhibits high specific capacitance (Cs) of 320(±5) F g-1 and 270(±5) F g-1 at 1 A g-1 and 5 A g-1, respectively in 1 M H2SO4. CMO nanofibers exhibit excellent cyclability (till 10,000 cycles @ 5 A g-1). To examine practical performance, solid-state symmetric supercapacitor (SSSC) is also fabricated using PVA-H2SO4 as gel electrolyte. The SSSC evinces high energy density of 75 W h kg-1 (comparable to Pb-acid and Ni-MH battery) along with high power density of 2 kW kg-1. Furthermore, a red colored LED (1.8 V @ current 20 mA) was lit for 5 min using single SSSC device supporting its output voltage of 2 V. This high performance of CMO in both aqueous and SSSC is attributed to one dimensional nanofibers consisting of voids/gaps with minimum inter-particle resistance that facilitates smoother transportation of electrons/ions. These voids/gaps in CMO (structural as well as morphological) act as intercalation/de-intercalation sites for extra storage performance, and also works as buffering space to accommodate stress/strain produced while long term cyclings.

  4. Fabrication of three-dimensional MIS nano-capacitor based on nano-imprinted single crystal silicon nanowire arrays

    KAUST Repository

    Zhai, Yujia

    2012-11-26

    We report fabrication of single crystalline silicon nanowire based-three-dimensional MIS nano-capacitors for potential analog and mixed signal applications. The array of nanowires is patterned by Step and Flash Imprint Lithography (S-FIL). Deep silicon etching (DSE) is used to form the nanowires with high aspect ratio, increase the electrode area and thus significantly enhance the capacitance. High-! dielectric is deposited by highly conformal atomic layer deposition (ALD) Al2O3 over the Si nanowires, and sputtered metal TaN serves as the electrode. Electrical measurements of fabricated capacitors show the expected increase of capacitance with greater nanowire height and decreasing dielectric thickness, consistent with calculations. Leakage current and time-dependent dielectric breakdown (TDDB) are also measured and compared with planar MIS capacitors. In view of greater interest in 3D transistor architectures, such as FinFETs, 3D high density MIS capacitors offer an attractive device technology for analog and mixed signal applications. - See more at: http://www.eurekaselect.com/105099/article#sthash.EzeJxk6j.dpuf

  5. Fabrication and electrical characterization of sub-micron diameter through-silicon via for heterogeneous three-dimensional integrated circuits

    Science.gov (United States)

    Abbaspour, R.; Brown, D. K.; Bakir, M. S.

    2017-02-01

    This paper presents the fabrication and electrical characterization of high aspect-ratio (AR) sub-micron diameter through silicon vias (TSVs) for densely interconnected three-dimensional (3D) stacked integrated circuits (ICs). The fabricated TSV technology features an AR of 16:1 with 680 nm diameter copper (Cu) core and 920 nm overall diameter. To address the challenges in scaling TSVs, scallop-free low roughness nano-Bosch silicon etching and direct Cu electroplating on a titanium-nitride (TiN) diffusion barrier layer have been developed as key enabling modules. The electrical resistance of the sub-micron TSVs is measured to be on average 1.2 Ω, and the Cu resistivity is extracted to be approximately 2.95 µΩ cm. Furthermore, the maximum achievable current-carrying capacity (CCC) of the scaled TSVs is characterized to be approximately 360 µA for the 680 nm Cu core.

  6. Deep reactive ion etching of silicon moulds for the fabrication of diamond x-ray focusing lenses

    Science.gov (United States)

    Malik, A. M.; Fox, O. J. L.; Alianelli, L.; Korsunsky, A. M.; Stevens, R.; Loader, I. M.; Wilson, M. C.; Pape, I.; Sawhney, K. J. S.; May, P. W.

    2013-12-01

    Diamond is a highly desirable material for use in x-ray optics and instrumentation. However, due to its extreme hardness and resistance to chemical attack, diamond is difficult to form into a structure suitable for x-ray lenses. Refractive lenses are capable of delivering x-ray beams with nanoscale resolution. A moulding technique for the fabrication of diamond lenses is reported. High-quality silicon moulds were made using photolithography and deep reactive ion etching. The study of the etch process conducted to achieve silicon moulds with vertical sidewalls and minimal surface roughness is discussed. Issues experienced when attempting to deposit diamond into a high-aspect-ratio mould by chemical vapour deposition are highlighted. Two generations of lenses have been successfully fabricated using this transfer-moulding approach with significant improvement in the quality and performance of the optics observed in the second iteration. Testing of the diamond x-ray optics on the Diamond Light Source Ltd synchrotron B16 beamline has yielded a line focus of sub-micrometre width.

  7. Surface modification of silicon-containing fluorocarbon films prepared by plasma-enhanced chemical vapor deposition

    Science.gov (United States)

    Jin, Yoonyoung; Desta, Yohannes; Goettert, Jost; Lee, G. S.; Ajmera, P. K.

    2005-07-01

    Surface modification of silicon-containing fluorocarbon (SiCF) films achieved by wet chemical treatments and through x-ray irradiation is examined. The SiCF films were prepared by plasma-enhanced chemical vapor deposition, using gas precursors of tetrafluoromethane and disilane. As-deposited SiCF film composition was analyzed by x-ray photoelectron spectroscopy. Surface modification of SiCF films utilizing n-lithiodiaminoethane wet chemical treatment is discussed. Sessile water-drop contact angle changed from 95°+/-2° before treatment to 32°+/-2° after treatment, indicating a change in the film surface characteristics from hydrophobic to hydrophilic. For x-ray irradiation on the SiCF film with a dose of 27.4 kJ/cm3, the contact angle of the sessile water drop changed from 95°+/-2° before radiation to 39°+/-3° after x-ray exposure. The effect of x-ray exposure on chemical bond structure of SiCF films is studied using Fourier transform infrared measurements. Electroless Cu deposition was performed to test the applicability of the surface modified films. The x-ray irradiation method offers a unique advantage in making possible surface modification in a localized area of high-aspect-ratio microstructures. Fabrication of a Ti-membrane x-ray mask is introduced here for selective surface modification using x-ray irradiation.

  8. Flow injection solid phase extraction electrothermal atomic absorption spectrometry for the determination of Cr(VI) by selective separation and preconcentration on a lab-made hybrid mesoporous solid microcolumn

    Energy Technology Data Exchange (ETDEWEB)

    Kim, Manuela; Stripeikis, Jorge [Laboratorio de Analisis de Trazas, Departamento de Quimica Inorganica, Analitica y Quimica Fisica, INQUIMAE, Universidad de Buenos Aires, Pabellon 2, Ciudad Universitaria, (1428) Buenos Aires (Argentina); Tudino, Mabel [Laboratorio de Analisis de Trazas, Departamento de Quimica Inorganica, Analitica y Quimica Fisica, INQUIMAE, Universidad de Buenos Aires, Pabellon 2, Ciudad Universitaria, (1428) Buenos Aires (Argentina)], E-mail: tudino@qi.fcen.uba.ar

    2009-06-15

    A lab-made hybrid mesoporous solid was employed in a flow injection solid phase extraction electrothermal atomic absorption spectrometric (FI-SPE-ETAAS) system for the selective retention of Cr(VI). The solid was prepared by co-condensation of sodium tetraethylortosilicate and 3-aminopropyltriethoxysilane by sol-gel methodology and one-pot synthesis and characterized by Fourier transform infrared spectroscopy, X ray diffraction spectroscopy, and scanning electronic microscopy. Adsorption capacities at different pH values of both, Cr(VI) and Cr(III), were also measured in order to obtain the optimum retention for Cr(VI) with no interference of Cr(III). The maximum capacity of adsorption (4.35 mmol g{sup -} {sup 1}) was observed for pH values between 2-3, whilst Cr(III) was found to remain in solution (adsorption capacity = 0.007 mmol g{sup -} {sup 1}). Then, a microcolumn (bed volume: 7.9 {mu}L) was filled with the solid and inserted in the FI-ETAAS system for analytical purposes. Since the analyte was strongly retained by the filling in the anionic form, 0.1 mol L{sup -} {sup 1} hydroxylammonium chloride in 1 mol L{sup -} {sup 1} hydrochloric acid was selected as eluent due to its redox characteristics. In this way, the sorbed Cr(VI) was easily released in the cationic form. The enrichment factor (EF) was found as a compromise between sensitivity and sample throughput and a value of 27 was obtained under optimized conditions: pH 2, sample loading 2 mL min{sup -} {sup 1} (60 s), elution flow rate 0.5 ml min{sup -} {sup 1} (eluent volume: 75 {mu}L). Under optimized conditions the limit of detection for Cr(VI) was 1.2 ng L{sup -} {sup 1}, the precision, expressed as RSD was 2.5%, the sample throughput 21/h, and the microcolumn lifetime was over 300 adsorption/desorption cycles. Cr(III) determination was also performed by simply measuring its concentration at the end of the column and after Cr(VI) retention by the mesoporous solid. Applications of the methodology to

  9. On-line speciation of inorganic and methyl mercury in waters and fish tissues using polyaniline micro-column and flow injection-chemical vapour generation-inductively coupled plasma mass spectrometry (FI-CVG-ICPMS).

    Science.gov (United States)

    Krishna, M V Balarama; Chandrasekaran, K; Karunasagar, D

    2010-04-15

    A simple and efficient method for the determination of ultra-trace amounts of inorganic mercury (iHg) and methylmercury (MeHg) in waters and fish tissues was developed using a micro-column filled with polyaniline (PANI) coupled online to flow injection-chemical vapour generation-inductively coupled plasma mass spectrometry (FI-CVG-ICPMS) system. Preliminary studies indicated that inorganic and methyl mercury species could be separated on PANI column in two different speciation approaches. At pH extraction of the mercury species from biological samples, was used directly to separate MeHg from iHg in the fish tissues (tuna fish ERM-CE 463, ERM-CE 464 and IAEA-350) by PANI column using speciation procedure 1. The determined values were in good agreement with certified values. Under optimal conditions, the limits of detection (LODs) were 2.52 pg and 3.24 pg for iHg and MeHg (as Hg) respectively. The developed method was applied successfully to the direct determination of iHg and MeHg in various waters (tap water, lake water, ground water and sea-water) and the recoveries for the spiked samples were in the range of 96-102% for both the Hg species.

  10. Preparation and characterization of magnetic nanoparticles for the on-line determination of gold, palladium, and platinum in mine samples based on flow injection micro-column preconcentration coupled with graphite furnace atomic absorption spectrometry.

    Science.gov (United States)

    Ye, Juanjuan; Liu, Shuxia; Tian, Miaomiao; Li, Wanjun; Hu, Bin; Zhou, Weihong; Jia, Qiong

    2014-01-01

    A simple and highly selective procedure for on-line determination of trace levels of Au, Pd, and Pt in mine samples has been developed using flow injection-column adsorption preconcentration coupled with graphite furnace atomic absorption spectrophotometry (FI-column-GFAAS). The precious metals were adsorbed on the as-synthesized magnetic nanoparticles functionalized with 4'-aminobenzo-15-crown-5-ether packed into a micro-column and then eluted with 2% thiourea + 0.1 mol L(-1) HCl solution prior to the determination by GFAAS. The properties of the magnetic adsorbents were investigated by scanning electron microscope (SEM), X-ray diffraction (XRD), and vibrating sample magnetometer (VSM). Various experimental parameters affecting the preconcentration of Au, Pd, and Pt were investigated and optimized. Under the optimal experimental conditions, the detection limits of the developed technique were 0.16 ng mL(-1) for Au, 0.28 ng mL(-1) for Pd, and 1.01 ng mL(-1) for Pt, with enrichment factors of 24.3, 13.9, and 17.8, respectively. Precisions, evaluated as repeatability of results, were 1.1%, 3.9%, and 4.4% respectively for Au, Pd, and Pt. The developed method was validated by the analysis of Au, Pd, and Pt in certified reference materials and mine samples with satisfactory results. © 2013 Published by Elsevier B.V.

  11. 微柱高效液相色谱法测定杨梅黄酮类物质%The Determination of Myrica Rubra Flavonoid by Microcolumn High Performance Liquid Chromatography

    Institute of Scientific and Technical Information of China (English)

    胡秋芬; 杨亚玲; 黄章杰; 杨光宇; 尹家元

    2004-01-01

      经固相萃取预分离,由微柱高效液相色谱法测定了几种杨梅树叶和树皮中的黄酮类物质.杨梅中主要的黄酮成分在2.0min内可达到基线分离;用紫外二极管矩阵检测器检测.方法标准回收率为97%~103%,相对标准偏差为1.6%~2.2%.%  A microcolumn high performance liquid chromatography (HPLC) method for the determination of flavonoid in myrica rubra leaf and bark was studied. The flavonoid was separated on a Waters XterraTM RP18 (1.0´ 30mm, 2.5m m) chromatographic column, with methanol and 0.05mol/L potassium dihydrogen phosphate buffer solution as mobile phase at a flow-rate of 0.2mL/min, and monitored with the photodiode array detector at 360nm. The recoveries of the flavonoid are 97%~103%, and relative standard deviations are 1.6%~2.2%.

  12. 微柱凝胶技术在检测新生儿溶血病中的应用%Application of Micro-column Gel Technique in the Detection of Hemolytic Disease of the Newborn

    Institute of Scientific and Technical Information of China (English)

    粟明丽

    2014-01-01

    新生儿溶血病(HDN)由母婴血型不合引起,是一种免疫性溶血性疾病,可导致新生儿黄疸、贫血、水肿、肝脾肿大、死胎等。本文简述了微柱凝胶技术在新生儿血型血清学检测中的应用,对于HDN的早期诊断、早期治疗、预防和降低新生儿溶血病的发生具有重要的意义。%Hemolytic Disease of the Newborn((HDN),caused by maternal-fetal blood group incompatibility, is an autoimmune hemolytic disease which can lead to neonatal jaundice,edema,anemia,hepatosplenomegaly,stillbirth, etc.This paper discusses the application of micro-column gel technique in the detection of neonatal blood group serology of the newborn,which is of significance for the early diagnosis and early treatment of HDN,thus preventing and reducing the occurrence of Hemolytic Disease of the Newborn.

  13. Performance of an automated solid-phase red cell adherence system compared with that of a manual gel microcolumn assay for the identification of antibodies eluted from red blood cells.

    Science.gov (United States)

    Finck, R H; Davis, R J; Teng, S; Goldfinger, D; Ziman, A F; Lu, Q; Yuan, S

    2011-01-01

    IgG antibodies coating red blood cells (RBCs) can be removed by elution procedures and their specificity determined by antibody identification studies. Although such testing is traditionally performed using the tube agglutination assay, prior studies have shown that the gel microcolumn (GMC) assay may also be used with comparable results. The purpose of this study was to compare an automated solid-phase red cell adherence (SPRCA) system with a GMC assay for the detection of antibodies eluted from RBCs. Acid eluates from 51 peripheral blood (PB) and 7 cord blood (CB) samples were evaluated by both an automated SPRCA instrument and a manual GMC assay. The concordance rate between the two systems for peripheral RBC samples was 88.2 percent (45 of 51), including cases with alloantibodies (n = 8), warm autoantibodies (n = 12), antibodies with no identifiable specificity (n = 2), and negative results (n = 23). There were six discordant cases, of which four had alloantibodies (including anti-Jka, -E, and -e) demonstrable by the SPRCA system only. In the remaining 2 cases, anti-Fya and antibodies with no identifiable specificity were demonstrable by the GMC assay only. All seven CB specimens produced concordant results, showing anti-A (n = 3), -B (n = 1), maternal anti-Jka (n = 2), or a negative result (n = 1). Automated SPRCA technology has a performance that is comparable with that of a manual GMC assay for identifying antibodies eluted from PB and CB RBCs.

  14. Detection and determination of common benzodiazepines and their metabolites in blood samples of forensic science interest. Microcolumn cleanup and high-performance liquid chromatography with reductive electrochemical detection at a pendent mercury drop electrode.

    Science.gov (United States)

    Lloyd, J B; Parry, D A

    1988-09-30

    Benzodiazepines in the blood samples typical of forensic science work are recovered from 100-250 microliters amounts of blood (diluted with aqueous sodium octyl sulphate to suppress protein binding) onto microcolumns of Porapak-T, and finally eluted into 60-microliters volumes of aqueous acetonitrile. The eluates may be taken directly for analysis by high-performance liquid chromatography (HPLC) with reductive amperometric detection at a pendent mercury drop electrode held at potentials down to -1.2 V vs. Ag/AgCl. For high sensitivity work the electrode is preceded by a coulometric detector fitted with porous carbon electrodes held at 0 V (proprietary reference electrode). The technique detects all of the commonly encountered benzodiazepines and others except clobazam, which contains no azomethine group. The detection limits generally are in the range 1-5 ng/ml (40-200 pg HPLC-injected) in hemolyzed human blood, with recovery values of 84-95%, depending on the actual benzodiazepine, over the range examined (less than or equal to 2.14 micrograms/ml). The respective values for the metabolites of nitrazepam are 8-12 ng/ml and 75-84%. The technique is very much less susceptible to the interferences afflicting other commonly applied techniques, and facilitates considerably the analysis of degraded samples.

  15. Doping Silicon Wafers with Boron by Use of Silicon Paste

    Institute of Scientific and Technical Information of China (English)

    Yu Gao; Shu Zhou; Yunfan Zhang; Chen Dong; Xiaodong Pi; Deren Yang

    2013-01-01

    In this work we introduce recently developed silicon-paste-enabled p-type doping for silicon.Boron-doped silicon nanoparticles are synthesized by a plasma approach.They are then dispersed in solvents to form silicon paste.Silicon paste is screen-printed at the surface of silicon wafers.By annealing,boron atoms in silicon paste diffuse into silicon wafers.Chemical analysis is employed to obtain the concentrations of boron in silicon nanoparticles.The successful doping of silicon wafers with boron is evidenced by secondary ion mass spectroscopy (SIMS) and sheet resistance measurements.

  16. Silicon: electrochemistry and luminescence

    NARCIS (Netherlands)

    Kooij, Ernst Stefan

    1997-01-01

    The electrochemistry of crystalline and porous silicon and the luminescence from porous silicon has been studied. One chapter deals with a model for the anodic dissolution of silicon in HF solution. In following chapters both the electrochemistry and various ways of generating visible luminescenc

  17. Silicon: electrochemistry and luminescence

    NARCIS (Netherlands)

    Kooij, Ernst Stefan

    1997-01-01

    The electrochemistry of crystalline and porous silicon and the luminescence from porous silicon has been studied. One chapter deals with a model for the anodic dissolution of silicon in HF solution. In following chapters both the electrochemistry and various ways of generating visible

  18. Silicon: electrochemistry and luminescence

    NARCIS (Netherlands)

    Kooij, Ernst Stefan

    2001-01-01

    The electrochemistry of crystalline and porous silicon and the luminescence from porous silicon has been studied. One chapter deals with a model for the anodic dissolution of silicon in HF solution. In following chapters both the electrochemistry and various ways of generating visible luminescenc

  19. Enhancement of Pool Boiling Heat Transfer Using Aligned Silicon Nanowire Arrays.

    Science.gov (United States)

    Shim, Dong Il; Choi, Geehong; Lee, Namkyu; Kim, Taehwan; Kim, Beom Seok; Cho, Hyung Hee

    2017-05-24

    Enhancing the critical heat flux (CHF), which is the capacity of heat dissipation, is important to secure high stability in two-phase cooling systems. Coolant supply to a dry hot spot is a major mechanism to prevent surface burn-out for enhancing the CHF. Here, we demonstrate a more ready supply of coolant using aligned silicon nanowires (A-SiNWs), with a high aspect ratio (>10) compared to that of conventional random silicon nanowires (R-SiNWs), which have a disordered arrangement, for additional CHF improvement. We propose the volumetric wicking rate, which represents the coolant supply properties by considering both the liquid supply velocity and the amount of coolant (i.e., wicking coefficient and wetted volume, respectively). Through experimental approaches, we confirm that the CHF is enhanced as the volumetric wicking rate is increased. In good agreement with the fabrication hypothesis, A-SiNWs demonstrate higher coolant supply abilities than those of R-SiNWs. The longest (7 μm) A-SiNWs have the highest volumetric wicking rate (25.11 × 10(-3) mm(3)/s) and increase the CHF to 245.6 W/cm(2), which is the highest value obtained using nanowires among reported data (178 and 26% enhanced vs unmodulated plain surface and R-SiNWs, respectively). These well-aligned SiNWs can increase the CHF significantly with efficient coolant supply, and it can ensure high stability in extremely high thermal load systems. Moreover, our study provides nanoscale interfacial design strategies for further improvement of heat dissipation.

  20. Passive technologies for future large-scale photonic integrated circuits on silicon: polarization handling, light non-reciprocity and loss reduction

    Directory of Open Access Journals (Sweden)

    Daoxin Dai

    2012-03-01

    Full Text Available Silicon-based large-scale photonic integrated circuits are becoming important, due to the need for higher complexity and lower cost for optical transmitters, receivers and optical buffers. In this paper, passive technologies for large-scale photonic integrated circuits are described, including polarization handling, light non-reciprocity and loss reduction. The design rule for polarization beam splitters based on asymmetrical directional couplers is summarized and several novel designs for ultra-short polarization beam splitters are reviewed. A novel concept for realizing a polarization splitter–rotator is presented with a very simple fabrication process. Realization of silicon-based light non-reciprocity devices (e.g., optical isolator, which is very important for transmitters to avoid sensitivity to reflections, is also demonstrated with the help of magneto-optical material by the bonding technology. Low-loss waveguides are another important technology for large-scale photonic integrated circuits. Ultra-low loss optical waveguides are achieved by designing a Si3N4 core with a very high aspect ratio. The loss is reduced further to <0.1 dB m−1 with an improved fabrication process incorporating a high-quality thermal oxide upper cladding by means of wafer bonding. With the developed ultra-low loss Si3N4 optical waveguides, some devices are also demonstrated, including ultra-high-Q ring resonators, low-loss arrayed-waveguide grating (demultiplexers, and high-extinction-ratio polarizers.

  1. Efficiency Enhancement of Nanotextured Black Silicon Solar Cells Using Al2O3/TiO2 Dual-Layer Passivation Stack Prepared by Atomic Layer Deposition.

    Science.gov (United States)

    Wang, Wei-Cheng; Tsai, Meng-Chen; Yang, Jason; Hsu, Chuck; Chen, Miin-Jang

    2015-05-20

    In this study, efficient nanotextured black silicon (NBSi) solar cells composed of silicon nanowire arrays and an Al2O3/TiO2 dual-layer passivation stack on the n(+) emitter were fabricated. The highly conformal Al2O3 and TiO2 surface passivation layers were deposited on the high-aspect-ratio surface of the NBSi wafers using atomic layer deposition. Instead of the single Al2O3 passivation layer with a negative oxide charge density, the Al2O3/TiO2 dual-layer passivation stack treated with forming gas annealing provides a high positive oxide charge density and a low interfacial state density, which are essential for the effective field-effect and chemical passivation of the n(+) emitter. In addition, the Al2O3/TiO2 dual-layer passivation stack suppresses the total reflectance over a broad range of wavelengths (400-1000 nm). Therefore, with the Al2O3/TiO2 dual-layer passivation stack, the short-circuit current density and efficiency of the NBSi solar cell were increased by 11% and 20%, respectively. In conclusion, a high efficiency of 18.5% was achieved with the NBSi solar cells by using the n(+)-emitter/p-base structure passivated with the Al2O3/TiO2 stack.

  2. The chemistry of silicon

    CERN Document Server

    Rochow, E G; Emeléus, H J; Nyholm, Ronald

    1975-01-01

    Pergamon Texts in Organic Chemistry, Volume 9: The Chemistry of Silicon presents information essential in understanding the chemical properties of silicon. The book first covers the fundamental aspects of silicon, such as its nuclear, physical, and chemical properties. The text also details the history of silicon, its occurrence and distribution, and applications. Next, the selection enumerates the compounds and complexes of silicon, along with organosilicon compounds. The text will be of great interest to chemists and chemical engineers. Other researchers working on research study involving s

  3. Hollow silicon microneedle array based trans-epidermal antiemetic patch for efficient management of chemotherapy induced nausea and vomiting

    Science.gov (United States)

    Kharbikar, Bhushan N.; Kumar S., Harish; Kr., Sindhu; Srivastava, Rohit

    2015-12-01

    Chemotherapy Induced Nausea and Vomiting (CINV) is a serious health concern in the treatment of cancer patients. Conventional routes for administering anti-emetics (i.e. oral and parenteral) have several drawbacks such as painful injections, poor patient compliance, dependence on skilled personnel, non-affordability to majority of population (parenteral), lack of programmability and suboptimal bioavailability (oral). Hence, we have developed a trans-epidermal antiemetic drug delivery patch using out-of-plane hollow silicon microneedle array. Microneedles are pointed micron-scale structures that pierce the epidermal layer of skin to reach dermal blood vessels and can directly release the drug in their vicinity. They are painless by virtue of avoiding significant contact with dermal sensory nerve endings. This alternate approach gives same pharmacodynamic effects as par- enteral route at a sparse drug-dose requirement, hence negligible side-effects and improved patient compliance. Microneedle design attributes were derived by systematic study of human skin anatomy, natural micron-size structures like wasp-sting and cactus-spine and multi-physics simulations. We used deep reactive ion etching with Bosch process and optimized recipe of gases to fabricate high-aspect-ratio hollow silicon microneedle array. Finally, microneedle array and polydimethylsiloxane drug reservoir were assembled to make finished anti-emetic patch. We assessed microneedles mechanical stability, physico-chemical properties and performed in-vitro, ex- vivo and in-vivo studies. These studies established functional efficacy of the device in trans-epidermal delivery of anti-emetics, its programmability, ease of use and biosafety. Thus, out-of-plane hollow silicon microneedle array trans-epidermal antiemetic patch is a promising strategy for painless and effective management of CINV at low cost in mainstream healthcare.

  4. Chemical Analysis Methods for Silicon Carbide

    Institute of Scientific and Technical Information of China (English)

    Shen Keyin

    2006-01-01

    @@ 1 General and Scope This Standard specifies the determination method of silicon dioxide, free silicon, free carbon, total carbon, silicon carbide, ferric sesquioxide in silicon carbide abrasive material.

  5. Glass-silicon column

    Energy Technology Data Exchange (ETDEWEB)

    Yu, Conrad M.

    2003-12-30

    A glass-silicon column that can operate in temperature variations between room temperature and about 450.degree. C. The glass-silicon column includes large area glass, such as a thin Corning 7740 boron-silicate glass bonded to a silicon wafer, with an electrode embedded in or mounted on glass of the column, and with a self alignment silicon post/glass hole structure. The glass/silicon components are bonded, for example be anodic bonding. In one embodiment, the column includes two outer layers of silicon each bonded to an inner layer of glass, with an electrode imbedded between the layers of glass, and with at least one self alignment hole and post arrangement. The electrode functions as a column heater, and one glass/silicon component is provided with a number of flow channels adjacent the bonded surfaces.

  6. Porous silicon gettering

    Energy Technology Data Exchange (ETDEWEB)

    Tsuo, Y.S.; Menna, P.; Al-Jassim, M. [National Renewable Energy Lab., Golden, CO (United States)] [and others

    1995-08-01

    We have studied a novel extrinsic gettering method that utilizes the very large surface areas, produced by porous silicon etch on both front and back surfaces of the silicon wafer, as gettering sites. In this method, a simple and low-cost chemical etching is used to generate the porous silicon layers. Then, a high-flux solar furnace (HFSF) is used to provide high-temperature annealing and the required injection of silicon interstitials. The gettering sites, along with the gettered impurities, can be easily removed at the end the process. The porous silicon removal process consists of oxidizing the porous silicon near the end the gettering process followed by sample immersion in HF acid. Each porous silicon gettering process removes up to about 10 {mu}m of wafer thickness. This gettering process can be repeated so that the desired purity level is obtained.

  7. Dual-Layer Nanostructured Flexible Thin-Film Amorphous Silicon Solar Cells with Enhanced Light Harvesting and Photoelectric Conversion Efficiency.

    Science.gov (United States)

    Lin, Yinyue; Xu, Zhen; Yu, Dongliang; Lu, Linfeng; Yin, Min; Tavakoli, Mohammad Mahdi; Chen, Xiaoyuan; Hao, Yuying; Fan, Zhiyong; Cui, Yanxia; Li, Dongdong

    2016-05-04

    Three-dimensional (3-D) structures have triggered tremendous interest for thin-film solar cells since they can dramatically reduce the material usage and incident light reflection. However, the high aspect ratio feature of some 3-D structures leads to deterioration of internal electric field and carrier collection capability, which reduces device power conversion efficiency (PCE). Here, we report high performance flexible thin-film amorphous silicon solar cells with a unique and effective light trapping scheme. In this device structure, a polymer nanopillar membrane is attached on top of a device, which benefits broadband and omnidirectional performances, and a 3-D nanostructure with shallow dent arrays underneath serves as a back reflector on flexible titanium (Ti) foil resulting in an increased optical path length by exciting hybrid optical modes. The efficient light management results in 42.7% and 41.7% remarkable improvements of short-circuit current density and overall efficiency, respectively. Meanwhile, an excellent flexibility has been achieved as PCE remains 97.6% of the initial efficiency even after 10 000 bending cycles. This unique device structure can also be duplicated for other flexible photovoltaic devices based on different active materials such as CdTe, Cu(In,Ga)Se2 (CIGS), organohalide lead perovskites, and so forth.

  8. Improving the thermal conductivity of epoxy resin by the addition of a mixture of graphite nanoplatelets and silicon carbide microparticles

    Directory of Open Access Journals (Sweden)

    T. Zhou

    2013-07-01

    Full Text Available In this work, an alternative type of carbon-based nanofiller, graphite nanoplatelets (GNPs with comparable properties, easier and lower-cost production, were used to improve the thermal conductivity of an epoxy. By adding 12 wt% GNPs or 71.7 wt% silicon carbide microparticles (micro-SiCs to epoxy, the thermal conductivity reached maxima that were respectively 6.3 and 20.7 times that of the epoxy alone. To further improve the thermal conductivity a mixture of the two fillers was utilized. The utilized GNPs are characterized by two-dimensional (2-D structure with high aspect ratio (~ 447, which enables GNPs effectively act as heat conductive bridges among 3-D micro-SiCs, thus contributes considerably to the formation of a more efficient 3-D percolating network for heat flow, resulting in higher thermal conductivity with relatively lower filler contents which is important for decreasing the density, viscosity and improving the processability of composites. A thermal conductivity, 26.1 times that of epoxy, was obtained with 7 wt% GNPs + 53 wt% micro-SiCs, thus not only break the bottleneck of further improving the thermal conductivity of epoxy composites but also broaden the applications of GNPs.

  9. 凝胶直接抗球蛋白试验在自身免疫性溶血性贫血实验诊断中的应用%The Application of Microcolumn Coomb's Test in the Diagnosis of Autoimmune Hemolytic Anemia

    Institute of Scientific and Technical Information of China (English)

    罗广平; 丁浩强; 骆宏; 汪传喜; 叶欣; 夏文杰; 戎霞; 陈扬凯; 邓晶; 赵阳

    2009-01-01

    Objective To investigate the characteristic of the microcolumn Coomb's test and to observe its diagnosis significance in autoimmune hemolytic anemia (AIHA). Methods Competitive microcolumn gel and a routinely used direct antiglobulin test (DAT) were used to study IgG and C3d in 135 cases of AIHA. Results 19 cases were identified in positive by routine typing. 24 cases were identified in positive by microcolunm gel, incuding 13 cases in IgG positive. 4 cases in C3d positive and 7 cases both in IgG and C3d positive. There were statistically difference between the microcolumn gel and routine DAT. Conclusion Microcolumn Coomb's test is a sensitive and objective method for the diagnosis of AIHA.%目的 探讨凝胶直接抗球蛋白试验的特点及其在自身免疫性溶血性贫血(AIHA)实验诊断中的应用价值.提高致敏红细胞检出率.方法 检测临床诊断疑似AIHA标本135例.用Coomb's凝胶试剂卡对受检标本进行直接抗球蛋白试验.以试管法直接抗球蛋白试验作对照.凝胶法阳性者用单特异性IgG和C3d凝胶试剂卡进行分型.结果 试管法直接抗球蛋白试验阳性19例,Coomb's凝胶直接抗球蛋白试验(GDAT)阳性24例,两种检测方法间差异有统计学意义(P<0.05).对24份凝胶直接抗球蛋白试验阳性标本进行IgG和C3d分型,其中IgG+C3d型7例(29%),IgG型13例(54%),C3d型4例(17%).结论 凝胶直接抗球蛋白试验不需洗涤红细胞,操作简便,重复性好;检测致敏红细胞灵敏度优于试管法,在AIHA实验诊断中值得临床推广应用.

  10. Simultaneous speciation of inorganic arsenic and antimony in water samples by hydride generation-double channel atomic fluorescence spectrometry with on-line solid-phase extraction using single-walled carbon nanotubes micro-column

    Energy Technology Data Exchange (ETDEWEB)

    Wu Hong, E-mail: wuhong1968@hotmail.com; Wang Xuecui; Liu Bing; Liu Yueling; Li Shanshan; Lu Jusheng; Tian Jiuying; Zhao Wenfeng; Yang Zonghui

    2011-01-15

    A new method was developed for the simultaneous speciation of inorganic arsenic and antimony in water by on-line solid-phase extraction coupled with hydride generation-double channel atomic fluorescence spectrometry (HG-DC-AFS). The speciation scheme involved the on-line formation and retention of the ammonium pyrrolidine dithiocarbamate complexes of As(III) and Sb(III) on a single-walled carbon nanotubes packed micro-column, followed by on-line elution and simultaneous detection of As(III) and Sb(III) by HG-DC-AFS; the total As and total Sb were determined by the same protocol after As(V) and Sb(V) were reduced by thiourea, with As(V) and Sb(V) concentrations obtained by subtraction. Various experimental parameters affecting the on-line solid-phase extraction and determination of the analytes species have been investigated in detail. With 180 s preconcentration time, the enrichment factors were found to be 25.4 for As(III) and 24.6 for Sb(III), with the limits of detection (LODs) of 3.8 ng L{sup -1} for As(III) and 2.1 ng L{sup -1} for Sb(III). The precisions (RSD) for five replicate measurements of 0.5 {mu}g L{sup -1} of As(III) and 0.2 {mu}g L{sup -1} of Sb(III) were 4.2 and 4.8%, respectively. The developed method was validated by the analysis of standard reference materials (NIST SRM 1640a), and was applied to the speciation of inorganic As and Sb in natural water samples.

  11. 葡聚糖凝胶微柱-HPLC测定氯雷他定二元醇质体包封率%Determination of Entrapment Efficiency of Loratadine Binary Ethosomes by Sephadex Microcolumn Com-bined with HPLC

    Institute of Scientific and Technical Information of China (English)

    柴俊; 陈鹰; 李凯

    2015-01-01

    Objective:To establish a method to determine the entrapment efficiency of loratadine binary ethosomes. Methods:The gel microcolumn centrifugation method was employed to separate the free drug from loratadine binary ethosomes. The content of lorata-dine was determined by HPLC to calculate the entrapment efficiency. Results: A calibration linear curve of loratadine concentration was within the range of 10. 2-102. 0 μg·ml-1(r=0. 999 5). The average entrapment efficiencies of three batches of loratadine binary ethosomes were 86. 75%, 87. 26% and 86. 00%, respectively. Conclusion:The method is simple and rapid, and can be used to de-termine the entrapment efficiency of loratadine binary ethosomes accurately.%目的::建立氯雷他定二元醇质体包封率的测定方法。方法:采用凝胶微柱离心法分离游离药物与二元醇质体,以HPLC测定氯雷他定的药物含量,计算二元醇质体的包封率。结果:氯雷他定浓度在10.2~102.0μg·ml-1内线性关系良好(r=0.9995)。3批次氯雷他定二元醇质体的包封率分别为86.75%,87.26%,86.00%。结论:该方法简便、迅速,可准确测定氯雷他定二元醇质体的包封率。

  12. Phenolic Profile of Potentilla anserina L. (Rosaceae Herb of Siberian Origin and Development of a Rapid Method for Simultaneous Determination of Major Phenolics in P. anserina Pharmaceutical Products by Microcolumn RP-HPLC-UV

    Directory of Open Access Journals (Sweden)

    Daniil N. Olennikov

    2014-12-01

    Full Text Available A chemical study of Potentilla anserina L. herb (Rosaceae of Siberian origin led to the isolation of 17 compounds. Three ellagitannins—potentillin, agrimonic acid A and B—are reported for the first time in this species. With a view to rapid quantitative analysis, a new method was developed for simultaneous determination of major phenolic compounds in P. anserina, including caffeic acid, myricetin-3-O-glucuronide, agrimoniin, ellagic acid, miquelianin, isorhamnetin-3-O-glucuronide, and kaempferol-3-O-rhamnoside. The quantitative determination was conducted by microcolumn reversed phase high-performance liquid chromatography with UV detection. Separation was performed using a ProntoSIL-120-5-C18 AQ column (60 mm × 1 mm × 5 μm with six-step gradient elution of aqueous 0.2 М LiClO4 in 0.006 M HClO4 and acetonitrile as mobile phases. The components were quantified by HPLC-UV at 270 nm. All calibration curves showed good linearity (r2 > 0.999 within test ranges. The reproducibility was evaluated by intra- and inter-day assays, and RSD values were less than 2.8%. The recoveries were between 97.15 and 102.38%. The limits of detection ranged from 0.21 to 1.94 μg/mL, and limits of quantification ranged from 0.65 to 5.88 μg/mL, respectively. Various solvents, extraction methods, temperatures, and times were evaluated to obtain the best extraction efficiency. The developed method was successfully applied for the analysis of selected pharmaceutical products: 12 batches of P. anserina herb collected from three Siberian regions (Yakutia, Buryatia, Irkutsk, two commercial samples of P. anserina herb, and some preparations (liquid extract, tincture, decoction, infusion, and dry extract.

  13. Silicon micro-mold

    Science.gov (United States)

    Morales, Alfredo M.

    2006-10-24

    The present invention describes a method for rapidly fabricating a robust 3-dimensional silicon-mold for use in preparing complex metal micro-components. The process begins by depositing a conductive metal layer onto one surface of a silicon wafer. A thin photoresist and a standard lithographic mask are then used to transfer a trace image pattern onto the opposite surface of the wafer by exposing and developing the resist. The exposed portion of the silicon substrate is anisotropically etched through the wafer thickness down to conductive metal layer to provide an etched pattern consisting of a series of rectilinear channels and recesses in the silicon which serve as the silicon micro-mold. Microcomponents are prepared with this mold by first filling the mold channels and recesses with a metal deposit, typically by electroplating, and then removing the silicon micro-mold by chemical etching.

  14. SILICON CARBIDE FOR SEMICONDUCTORS

    Science.gov (United States)

    This state-of-the-art survey on silicon carbide for semiconductors includes a bibliography of the most important references published as of the end...of 1964. The various methods used for growing silicon carbide single crystals are reviewed, as well as their properties and devices fabricated from...them. The fact that the state of-the-art of silicon carbide semiconductors is not further advanced may be attributed to the difficulties of growing

  15. Silicon Carbide Shapes.

    Science.gov (United States)

    Free-standing silicon carbide shapes are produced by passing a properly diluted stream of a reactant gas, for example methyltrichlorosilane, into a...reaction chamber housing a thin walled, hollow graphite body heated to 1300-1500C. After the graphite body is sufficiently coated with silicon carbide , the...graphite body is fired, converting the graphite to gaseous CO2 and CO and leaving a silicon carbide shaped article remaining.

  16. Novel Silicon Nanotubes

    Institute of Scientific and Technical Information of China (English)

    2001-01-01

    Novel silicon nanotubes with inner-diameter of 60-80 nm was prepared using hydrogen-added dechlorination of SiCl4 followed by chemical vapor deposition (CVD) on a NixMgyO catalyst. The TEM observation showed that the suitable reaction temperature is 973 K for the formation of silicon nanotubes. Most of silicon nanotubes have one open end and some have two closed ends. The shape ofnanoscale silicon, however, is a micro-crystal type at 873 K, a rod or needle type at 993 K and an onion-type at 1023 K, respectively.

  17. Breast Implants: Saline vs. Silicone

    Science.gov (United States)

    ... differ in material and consistency, however. Saline breast implants Saline implants are filled with sterile salt water. ... of any age for breast reconstruction. Silicone breast implants Silicone implants are pre-filled with silicone gel — ...

  18. Coupling sequential injection on-line preconcentration by means of a renewable microcolumn with ion-exchange beads with detection by electrothermal atomic absorption spectrometry. Comparing the performance of eluting the loaded beads with transporting them directly into the graphite tube

    DEFF Research Database (Denmark)

    Wang, Jianhua; Hansen, Elo Harald

    2001-01-01

    The design of a flow injection/sequential injection (FIA/SIA) on-line preconcentration system incorporating a renewable microcolumn with ion-exchange beads and interfaced with an electrothermal atomic absorption spectrometry (ETAAS) detector is described, and its practical applicability is demons......The design of a flow injection/sequential injection (FIA/SIA) on-line preconcentration system incorporating a renewable microcolumn with ion-exchange beads and interfaced with an electrothermal atomic absorption spectrometry (ETAAS) detector is described, and its practical applicability.......4% for the procedure in which the loaded beads are transported directly to the graphite furnace for pyrolysis and atomization, and even improved in comparison to the traditional unidirectional and bidirectional repetitive elution procedures which under comparable conditions yield R.S.D.-values of 5.8 and 4.......1 and a detection limit of 10.2ng/l along with a sampling frequency of 12 s/h were obtained, which are at the same levels as those for the previously described procedure without elution. The present approach was validated by determination of the nickel contents in two certified reference materials, an industrial...

  19. Nonlinear silicon photonics

    Science.gov (United States)

    Borghi, M.; Castellan, C.; Signorini, S.; Trenti, A.; Pavesi, L.

    2017-09-01

    Silicon photonics is a technology based on fabricating integrated optical circuits by using the same paradigms as the dominant electronics industry. After twenty years of fervid development, silicon photonics is entering the market with low cost, high performance and mass-manufacturable optical devices. Until now, most silicon photonic devices have been based on linear optical effects, despite the many phenomenologies associated with nonlinear optics in both bulk materials and integrated waveguides. Silicon and silicon-based materials have strong optical nonlinearities which are enhanced in integrated devices by the small cross-section of the high-index contrast silicon waveguides or photonic crystals. Here the photons are made to strongly interact with the medium where they propagate. This is the central argument of nonlinear silicon photonics. It is the aim of this review to describe the state-of-the-art in the field. Starting from the basic nonlinearities in a silicon waveguide or in optical resonator geometries, many phenomena and applications are described—including frequency generation, frequency conversion, frequency-comb generation, supercontinuum generation, soliton formation, temporal imaging and time lensing, Raman lasing, and comb spectroscopy. Emerging quantum photonics applications, such as entangled photon sources, heralded single-photon sources and integrated quantum photonic circuits are also addressed at the end of this review.

  20. Nonlinear silicon photonics

    Science.gov (United States)

    Tsia, Kevin K.; Jalali, Bahram

    2010-05-01

    An intriguing optical property of silicon is that it exhibits a large third-order optical nonlinearity, with orders-ofmagnitude larger than that of silica glass in the telecommunication band. This allows efficient nonlinear optical interaction at relatively low power levels in a small footprint. Indeed, we have witnessed a stunning progress in harnessing the Raman and Kerr effects in silicon as the mechanisms for enabling chip-scale optical amplification, lasing, and wavelength conversion - functions that until recently were perceived to be beyond the reach of silicon. With all the continuous efforts developing novel techniques, nonlinear silicon photonics is expected to be able to reach even beyond the prior achievements. Instead of providing a comprehensive overview of this field, this manuscript highlights a number of new branches of nonlinear silicon photonics, which have not been fully recognized in the past. In particular, they are two-photon photovoltaic effect, mid-wave infrared (MWIR) silicon photonics, broadband Raman effects, inverse Raman scattering, and periodically-poled silicon (PePSi). These novel effects and techniques could create a new paradigm for silicon photonics and extend its utility beyond the traditionally anticipated applications.

  1. Periodically poled silicon

    Science.gov (United States)

    Hon, Nick K.; Tsia, Kevin K.; Solli, Daniel R.; Khurgin, Jacob B.; Jalali, Bahram

    2010-02-01

    Bulk centrosymmetric silicon lacks second-order optical nonlinearity χ(2) - a foundational component of nonlinear optics. Here, we propose a new class of photonic device which enables χ(2) as well as quasi-phase matching based on periodic stress fields in silicon - periodically-poled silicon (PePSi). This concept adds the periodic poling capability to silicon photonics, and allows the excellent crystal quality and advanced manufacturing capabilities of silicon to be harnessed for devices based on χ(2)) effects. The concept can also be simply achieved by having periodic arrangement of stressed thin films along a silicon waveguide. As an example of the utility, we present simulations showing that mid-wave infrared radiation can be efficiently generated through difference frequency generation from near-infrared with a conversion efficiency of 50% based on χ(2) values measurements for strained silicon reported in the literature [Jacobson et al. Nature 441, 199 (2006)]. The use of PePSi for frequency conversion can also be extended to terahertz generation. With integrated piezoelectric material, dynamically control of χ(2)nonlinearity in PePSi waveguide may also be achieved. The successful realization of PePSi based devices depends on the strength of the stress induced χ(2) in silicon. Presently, there exists a significant discrepancy in the literature between the theoretical and experimentally measured values. We present a simple theoretical model that produces result consistent with prior theoretical works and use this model to identify possible reasons for this discrepancy.

  2. ALICE silicon strip module

    CERN Multimedia

    Maximilien Brice

    2006-01-01

    This small silicon detector strip will be inserted into the inner tracking system (ITS) on the ALICE detector at CERN. This detector relies on state-of-the-art particle tracking techniques. These double-sided silicon strip modules have been designed to be as lightweight and delicate as possible as the ITS will eventually contain five square metres of these devices.

  3. SILICON CARBIDE DATA SHEETS

    Science.gov (United States)

    These data sheets present a compilation of a wide range of electrical, optical and energy values for alpha and beta- silicon carbide in bulk and film...spectrum. Energy data include energy bands, energy gap and energy levels for variously-doped silicon carbide , as well as effective mass tables, work

  4. Silicon Valley Ecosystem

    Institute of Scientific and Technical Information of China (English)

    Joseph Leu

    2005-01-01

    @@ It is unlikely that any industrial region of the world has received as much scrutiny and study as Silicon Valley. Despite the recent crash of Internet and telecommunications stocks,Silicon Valley remains the world's engine of growth for numerous high-technology sectors.

  5. Photoluminescence of Silicon Nanocrystals in Silicon Oxide

    Directory of Open Access Journals (Sweden)

    L. Ferraioli

    2007-01-01

    Full Text Available Recent results on the photoluminescence properties of silicon nanocrystals embedded in silicon oxide are reviewed and discussed. The attention is focused on Si nanocrystals produced by high-temperature annealing of silicon rich oxide layers deposited by plasma-enhanced chemical vapor deposition. The influence of deposition parameters and layer thickness is analyzed in detail. The nanocrystal size can be roughly controlled by means of Si content and annealing temperature and time. Unfortunately, a technique for independently fine tuning the emission efficiency and the size is still lacking; thus, only middle size nanocrystals have high emission efficiency. Interestingly, the layer thickness affects the nucleation and growth kinetics so changing the luminescence efficiency.

  6. Applications of direct antiglobulin test with microcolumn gel in the diagnosis of autoimmune hemolytic anemia disease%微柱凝胶直接抗人球蛋白试验对自身免疫性溶血性贫血诊断的应用

    Institute of Scientific and Technical Information of China (English)

    刘凌; 李流娇; 莫水群

    2012-01-01

    Objective To analyze the effects of direct antiglobulin test with microcolumn gel in the diagnosis of autoimmune hemolytic anemia disease in order to provide references for clinic.Methods The blood specimens of 208 cases with positive blood cross-matching were selected.The tested akaryocyte were invided into ablution group and unablution group.We tested the effects of direct antiglobulin test with microcolumn gel.Meanwhile,the type of IgG and C3d was carried in 186 positive cases.In control group,the direct antiglobulin test with traditional tube was used; in the observation group there was direct antiglobulin test with microcolumn gel.Results The tested positive rate was 89.4% in the observation group and 53.8% in the control group; the checking method in the observation group was significantly better than that in the control group (P < 0.05).Saline washed red blood cells had no effects on the results of antiglobulin test with microcolumn gel,including the same positive 186 cases.The type of IgG,C3d,IgG + C3d was 46.77% (87/186),3.23% (6/186),50.00% (93/186) respectively.Conclusion The direct antiglobulin test with microcolumn gel has high clinical application value in diagnosis of autoimmune hemolytic anemia disease.%目的 分析微柱凝胶直接抗人球蛋白试验对自身免疫性溶血性贫血诊断的效果,以便为临床提供参考.方法 选择208例交叉配血次侧阳性的标本为观察组,采用微柱凝胶直接抗人球蛋白试验;将受检红细胞分成洗涤组和非洗涤组,检测红细胞洗涤对微柱凝胶直接抗人球蛋白试验的影响;同时对此检测方法阳性结果的186例红细胞进行IgG和C3d分型.对照组(208名)采用试管法直接抗人球蛋白试验.结果 观察组与对照组阳性率比较差异有统计学意义[ 89.4%( 186/208)与53.8% (112/208),P<0.05].微柱凝胶直接抗人球蛋白试验生理盐水洗涤和非洗涤组受检红细胞的208份血液样本中同

  7. Steps towards silicon optoelectronics

    CERN Document Server

    Starovoytov, A

    1999-01-01

    nanostructure fabrication. Thus, this thesis makes a dual contribution to the chosen field: it summarises the present knowledge on the possibility of utilising optical properties of nanocrystalline silicon in silicon-based electronics, and it reports new results within the framework of the subject. The main conclusion is that due to its promising optoelectronic properties nanocrystalline silicon remains a prospective competitor for the cheapest and fastest microelectronics of the next century. This thesis addresses the issue of a potential future microelectronics technology, namely the possibility of utilising the optical properties of nanocrystalline silicon for optoelectronic circuits. The subject is subdivided into three chapters. Chapter 1 is an introduction. It formulates the oncoming problem for microelectronic development, explains the basics of Integrated Optoelectronics, introduces porous silicon as a new light-emitting material and gives a brief review of other competing light-emitting material syst...

  8. Isolated Islands by Selective Local Oxidation (islo): a Silicon-On (soi) Technology for Nanoelectronic and Nanoelectromechanical Applications.

    Science.gov (United States)

    Arney, Susanne Christine

    aspect ratio structure by RIE and ion implantation, gate oxide integrity, source/drain junction formation and contacts have been evaluated. The effects of doping, silicon volume, and degree of isolation on device performance have been simulated.

  9. Transformational silicon electronics

    KAUST Repository

    Rojas, Jhonathan Prieto

    2014-02-25

    In today\\'s traditional electronics such as in computers or in mobile phones, billions of high-performance, ultra-low-power devices are neatly integrated in extremely compact areas on rigid and brittle but low-cost bulk monocrystalline silicon (100) wafers. Ninety percent of global electronics are made up of silicon. Therefore, we have developed a generic low-cost regenerative batch fabrication process to transform such wafers full of devices into thin (5 μm), mechanically flexible, optically semitransparent silicon fabric with devices, then recycling the remaining wafer to generate multiple silicon fabric with chips and devices, ensuring low-cost and optimal utilization of the whole substrate. We show monocrystalline, amorphous, and polycrystalline silicon and silicon dioxide fabric, all from low-cost bulk silicon (100) wafers with the semiconductor industry\\'s most advanced high-κ/metal gate stack based high-performance, ultra-low-power capacitors, field effect transistors, energy harvesters, and storage to emphasize the effectiveness and versatility of this process to transform traditional electronics into flexible and semitransparent ones for multipurpose applications. © 2014 American Chemical Society.

  10. Silicon applications in photonics

    Science.gov (United States)

    Jelenski, A. M.; Gawlik, G.; Wesolowski, M.

    2005-09-01

    Silicon technology enabled the miniaturization of computers and other electronic system for information storage, transmission and transformation allowing the development of the Knowledge Based Information Society. Despite the fact that silicon roadmap indicates possibilities for further improvement, already now the speed of electrons and the bandwidth of electronic circuits are not sufficient and photons are commonly utilized for signal transmission through optical fibers and purely photonic circuits promise further improvements. However materials used for these purposes II/V semiconductor compounds, glasses make integration of optoelectronic circuits with silicon complex an expensive. Therefore research on light generation, transformation and transmission in silicon is very active and recently, due to nanotechnology some spectacular results were achieved despite the fact that mechanisms of light generation are still discussed. Three topics will be discussed. Porous silicon was actively investigated due to its relatively efficient electroluminescence enabling its use in light sources. Its index of refraction, differs considerably from the index of silicon, and this allows its utilization for Bragg mirrors, wave guides and photonic crystals. The enormous surface enables several applications on medicine and biotechnology and in particular due to the effective chemo-modulation of its refracting index the design of optical chemosensors. An effective luminescence of doped and undoped nanocrystalline silicon opened another way for the construction of silicon light sources. Optical amplification was already discovered opening perspectives for the construction of nanosilicon lasers. Luminescences was observed at red, green and blue wavelengths. The used technology of silica and ion implantation are compatible with commonly used CMOS technology. Finally the recently developed and proved idea of optically pumped silicon Raman lasers, using nonlinearity and vibrations in the

  11. Roadmap on silicon photonics

    Science.gov (United States)

    Thomson, David; Zilkie, Aaron; Bowers, John E.; Komljenovic, Tin; Reed, Graham T.; Vivien, Laurent; Marris-Morini, Delphine; Cassan, Eric; Virot, Léopold; Fédéli, Jean-Marc; Hartmann, Jean-Michel; Schmid, Jens H.; Xu, Dan-Xia; Boeuf, Frédéric; O'Brien, Peter; Mashanovich, Goran Z.; Nedeljkovic, M.

    2016-07-01

    Silicon photonics research can be dated back to the 1980s. However, the previous decade has witnessed an explosive growth in the field. Silicon photonics is a disruptive technology that is poised to revolutionize a number of application areas, for example, data centers, high-performance computing and sensing. The key driving force behind silicon photonics is the ability to use CMOS-like fabrication resulting in high-volume production at low cost. This is a key enabling factor for bringing photonics to a range of technology areas where the costs of implementation using traditional photonic elements such as those used for the telecommunications industry would be prohibitive. Silicon does however have a number of shortcomings as a photonic material. In its basic form it is not an ideal material in which to produce light sources, optical modulators or photodetectors for example. A wealth of research effort from both academia and industry in recent years has fueled the demonstration of multiple solutions to these and other problems, and as time progresses new approaches are increasingly being conceived. It is clear that silicon photonics has a bright future. However, with a growing number of approaches available, what will the silicon photonic integrated circuit of the future look like? This roadmap on silicon photonics delves into the different technology and application areas of the field giving an insight into the state-of-the-art as well as current and future challenges faced by researchers worldwide. Contributions authored by experts from both industry and academia provide an overview and outlook for the silicon waveguide platform, optical sources, optical modulators, photodetectors, integration approaches, packaging, applications of silicon photonics and approaches required to satisfy applications at mid-infrared wavelengths. Advances in science and technology required to meet challenges faced by the field in each of these areas are also addressed together with

  12. Recrystallization of polycrystalline silicon

    Science.gov (United States)

    Lall, C.; Kulkarni, S. B.; Graham, C. D., Jr.; Pope, D. P.

    1981-01-01

    Optical metallography is used to investigate the recrystallization properties of polycrystalline semiconductor-grade silicon. It is found that polycrystalline silicon recrystallizes at 1380 C in relatively short times, provided that the prior deformation is greater than 30%. For a prior deformation of about 40%, the recrystallization process is essentially complete in about 30 minutes. Silicon recrystallizes at a substantially slower rate than metals at equivalent homologous temperatures. The recrystallized grain size is insensitive to the amount of prestrain for strains in the range of 10-50%.

  13. Porous silicon gettering

    Energy Technology Data Exchange (ETDEWEB)

    Tsuo, Y.S.; Menna, P.; Pitts, J.R. [National Renewable Energy Lab., Golden, CO (United States)] [and others

    1996-05-01

    The authors have studied a novel extrinsic gettering method that uses the large surface areas produced by a porous-silicon etch as gettering sites. The annealing step of the gettering used a high-flux solar furnace. They found that a high density of photons during annealing enhanced the impurity diffusion to the gettering sites. The authors used metallurgical-grade Si (MG-Si) prepared by directional solidification casing as the starting material. They propose to use porous-silicon-gettered MG-Si as a low-cost epitaxial substrate for polycrystalline silicon thin-film growth.

  14. Microstructured silicon radiation detector

    Energy Technology Data Exchange (ETDEWEB)

    Okandan, Murat; Derzon, Mark S.; Draper, Bruce L.

    2017-03-14

    A radiation detector comprises a silicon body in which are defined vertical pores filled with a converter material and situated within silicon depletion regions. One or more charge-collection electrodes are arranged to collect current generated when secondary particles enter the silicon body through walls of the pores. The pores are disposed in low-density clusters, have a majority pore thickness of 5 .mu.m or less, and have a majority aspect ratio, defined as the ratio of pore depth to pore thickness, of at least 10.

  15. Emissivity of microstructured silicon.

    Science.gov (United States)

    Maloney, Patrick G; Smith, Peter; King, Vernon; Billman, Curtis; Winkler, Mark; Mazur, Eric

    2010-03-01

    Infrared transmittance and hemispherical-directional reflectance data from 2.5 to 25 microm on microstructured silicon surfaces have been measured, and spectral emissivity has been calculated for this wavelength range. Hemispherical-total emissivity is calculated for the samples and found to be 0.84 before a measurement-induced annealing and 0.65 after the measurement for the sulfur-doped sample. Secondary samples lack a measurement-induced anneal, and reasons for this discrepancy are presented. Emissivity numbers are plotted and compared with a silicon substrate, and Aeroglaze Z306 black paint. Use of microstructured silicon as a blackbody or microbolometer surface is modeled and presented, respectively.

  16. Silicon nanowire hybrid photovoltaics

    KAUST Repository

    Garnett, Erik C.

    2010-06-01

    Silicon nanowire Schottky junction solar cells have been fabricated using n-type silicon nanowire arrays and a spin-coated conductive polymer (PEDOT). The polymer Schottky junction cells show superior surface passivation and open-circuit voltages compared to standard diffused junction cells with native oxide surfaces. External quantum efficiencies up to 88% were measured for these silicon nanowire/PEDOT solar cells further demonstrating excellent surface passivation. This process avoids high temperature processes which allows for low-cost substrates to be used. © 2010 IEEE.

  17. Efficiency Improvement of Fully Automatic Microcolumn Glass Sphere Technology Used in Blood Group Compatibility Tests%全自动微柱玻璃珠技术提高血型相容性检测效能

    Institute of Scientific and Technical Information of China (English)

    蒋光明; 王保龙; 完晓菊; 王敏; 周建华; 廖艳秋

    2011-01-01

    探讨基于微柱玻瑞珠技术的ORTHO AutoVue Innova全自动血型及配血分析系统能否满足输血科血型血清学实验要求.用ORTHO AutoVue Innova全自动血型及配血分析系统和盐水介质法分别检测IgM类抗C、抗c、抗D、抗E和抗e系列稀释液各16份与相应抗原阳性的红细胞凝集反应的强度;用ORTHO AutoVue Innova全自动血型及配血分析系统、凝聚胺法和抗人球蛋白法分别检测IgG类抗D稀释液各16份与RhD阳性红细胞凝集反应的强度;再比较分析微柱玻璃珠法与传统对照实验的检测灵敏度.结果表明,ORTHO AutoVue Innova全自动血型及配血法对IgM类抗C、抗c、抗D、抗E和抗e的检测灵敏度分别为1:69.8、1:33.4、1:1448.1、1:139.6和1:32.0;盐水介质法的相应灵敏度分别为1:16.7、1:16.6、1:430.5、1:34.9和1:9.9.2种方法检测灵敏度的差异均具有统计学意义(IgM类抗C、杭c、抗D、抗E及抗e的t值分别为14.38、5.48、10.25、12.65和9.59,p均<0.05).对于IgG类抗D微柱玻璃珠法、凝聚胺法和抗人球蛋白法的检测灵敏度分别为1:980.6、1:181.0和1:304.4,三种检测方法间灵敏度的差异具有统计学意义(F=51.15,p<0.01).结论:ORTHO AutoVue Innova全自动血型及配血法比传统方法具有更高的检测灵敏度,将其用于常规血型血清学检测是安全可靠的.%The purpose of this study was to determine whether the fully automated ORTHO AutoVue Innova system,which based on the microcolumn glass sphere technology, is accurate enough to meet immunohematology testing needs at blood banks. 16 IgM anti-C, anti-c, anti-D, anti-E and anti-e dilution series were tested respectively, with corresponding antigen positive red blood cell solutions, by ORTHO AutoVue Innova system and saline medium test. 16 IgG anti-D dilution series were tested respectively with RhD positive red blood cell solutions by ORTHO AutoVue Innova system,polybrene test and antiglobulin test. The accuracies of

  18. Fabrication and characterization of silicon wire solar cells having ZnO nanorod antireflection coating on Al-doped ZnO seed layer.

    Science.gov (United States)

    Baek, Seong-Ho; Noh, Bum-Young; Park, Il-Kyu; Kim, Jae Hyun

    2012-01-05

    In this study, we have fabricated and characterized the silicon [Si] wire solar cells with conformal ZnO nanorod antireflection coating [ARC] grown on a Al-doped ZnO [AZO] seed layer. Vertically aligned Si wire arrays were fabricated by electrochemical etching and, the p-n junction was prepared by spin-on dopant diffusion method. Hydrothermal growth of the ZnO nanorods was followed by AZO film deposition on high aspect ratio Si microwire arrays by atomic layer deposition [ALD]. The introduction of an ALD-deposited AZO film on Si wire arrays not only helps to create the ZnO nanorod arrays, but also has a strong impact on the reduction of surface recombination. The reflectance spectra show that ZnO nanorods were used as an efficient ARC to enhance light absorption by multiple scattering. Also, from the current-voltage results, we found that the combination of the AZO film and ZnO nanorods on Si wire solar cells leads to an increased power conversion efficiency by more than 27% compared to the cells without it.

  19. Light scattering effect of ITO:Zr/AZO films deposited on periodic textured glass surface morphologies for silicon thin film solar cells

    Energy Technology Data Exchange (ETDEWEB)

    Hussain, Shahzada Qamar [Sungkyunkwan University, Department of Energy Science, Suwon (Korea, Republic of); COMSATS Institute of Information Technology, Department of Physics, Lahore (Pakistan); Kwon, Gi Duk; Kim, Sunbo; Balaji, Nagarajan; Shin, Chonghoon; Kim, Sangho; Khan, Shahbaz; Pribat, Didier [Sungkyunkwan University, Department of Energy Science, Suwon (Korea, Republic of); Ahn, Shihyun; Le, Anh Huy Tuan; Park, Hyeongsik; Raja, Jayapal; Lee, Youn-Jung [Sungkyunkwan University, College of Information and Communication Engineering, Suwon (Korea, Republic of); Razaq, Aamir [COMSATS Institute of Information Technology, Department of Physics, Lahore (Pakistan); Velumani, S. [Sungkyunkwan University, College of Information and Communication Engineering, Suwon (Korea, Republic of); Department of Electrical Engineering (SEES), Mexico City (Mexico); Yi, Junsin [Sungkyunkwan University, Department of Energy Science, Suwon (Korea, Republic of); Sungkyunkwan University, College of Information and Communication Engineering, Suwon (Korea, Republic of)

    2015-09-15

    Various SF{sub 6}/Ar plasma-textured periodic glass surface morphologies for high transmittance, haze ratio and low sheet resistance of ITO:Zr films are reported. The SF{sub 6}/Ar plasma-textured glass surface morphologies were changed from low aspect ratio to high aspect ratio with the increase in RF power from 500 to 600 W. The micro- and nano-size features of textured glass surface morphologies enhanced the haze ratio in visible as well as NIR wavelength region. Micro-size textured features also influenced the sheet resistance and electrical characteristics of ITO:Zr films due to step coverage. The ITO:Zr/AZO bilayer was used as front TCO electrode for p-i-n amorphous silicon thin film solar cells with current density-voltage characteristics as: V{sub oc} = 875 mV, FF = 70.90 %, J{sub sc} = 11.31 mA/cm{sup 2}, η = 7.02 %. (orig.)

  20. Integrated silicon optoelectronics

    CERN Document Server

    Zimmermann, Horst

    2000-01-01

    'Integrated Silicon Optoelectronics'assembles optoelectronics and microelectronics The book concentrates on silicon as the major basis of modern semiconductor devices and circuits Starting from the basics of optical emission and absorption and from the device physics of photodetectors, the aspects of the integration of photodetectors in modern bipolar, CMOS, and BiCMOS technologies are discussed Detailed descriptions of fabrication technologies and applications of optoelectronic integrated circuits are included The book, furthermore, contains a review of the state of research on eagerly expected silicon light emitters In order to cover the topic of the book comprehensively, integrated waveguides, gratings, and optoelectronic power devices are included in addition Numerous elaborate illustrations promote an easy comprehension 'Integrated Silicon Optoelectronics'will be of value to engineers, physicists, and scientists in industry and at universities The book is also recommendable for graduate students speciali...

  1. Silicon microfabricated beam expander

    Science.gov (United States)

    Othman, A.; Ibrahim, M. N.; Hamzah, I. H.; Sulaiman, A. A.; Ain, M. F.

    2015-03-01

    The feasibility design and development methods of silicon microfabricated beam expander are described. Silicon bulk micromachining fabrication technology is used in producing features of the structure. A high-precision complex 3-D shape of the expander can be formed by exploiting the predictable anisotropic wet etching characteristics of single-crystal silicon in aqueous Potassium-Hydroxide (KOH) solution. The beam-expander consist of two elements, a micromachined silicon reflector chamber and micro-Fresnel zone plate. The micro-Fresnel element is patterned using lithographic methods. The reflector chamber element has a depth of 40 µm, a diameter of 15 mm and gold-coated surfaces. The impact on the depth, diameter of the chamber and absorption for improved performance are discussed.

  2. Silicon microfabricated beam expander

    Energy Technology Data Exchange (ETDEWEB)

    Othman, A., E-mail: aliman@ppinang.uitm.edu.my; Ibrahim, M. N.; Hamzah, I. H.; Sulaiman, A. A. [Faculty of Electrical Engineering, Universiti Teknologi MARA Malaysia, 40450, Shah Alam, Selangor (Malaysia); Ain, M. F. [School of Electrical and Electronic Engineering, Engineering Campus, Universiti Sains Malaysia, Seri Ampangan, 14300,Nibong Tebal, Pulau Pinang (Malaysia)

    2015-03-30

    The feasibility design and development methods of silicon microfabricated beam expander are described. Silicon bulk micromachining fabrication technology is used in producing features of the structure. A high-precision complex 3-D shape of the expander can be formed by exploiting the predictable anisotropic wet etching characteristics of single-crystal silicon in aqueous Potassium-Hydroxide (KOH) solution. The beam-expander consist of two elements, a micromachined silicon reflector chamber and micro-Fresnel zone plate. The micro-Fresnel element is patterned using lithographic methods. The reflector chamber element has a depth of 40 µm, a diameter of 15 mm and gold-coated surfaces. The impact on the depth, diameter of the chamber and absorption for improved performance are discussed.

  3. Neuromorphic Silicon Photonics

    CERN Document Server

    Tait, Alexander N; de Lima, Thomas Ferreira; Wu, Allie X; Nahmias, Mitchell A; Shastri, Bhavin J; Prucnal, Paul R

    2016-01-01

    We report first observations of an integrated analog photonic network, in which connections are configured by microring weight banks, as well as the first use of electro-optic modulators as photonic neurons. A mathematical isomorphism between the silicon photonic circuit and a continuous neural model is demonstrated through dynamical bifurcation analysis. Exploiting this isomorphism, existing neural engineering tools can be adapted to silicon photonic information processing systems. A 49-node silicon photonic neural network programmed using a "neural compiler" is simulated and predicted to outperform a conventional approach 1,960-fold in a toy differential system emulation task. Photonic neural networks leveraging silicon photonic platforms could access new regimes of ultrafast information processing for radio, control, and scientific computing.

  4. The DELPHI silicon tracker

    CERN Document Server

    Pernegger, H

    1997-01-01

    The DELPHI collaboration has upgraded the Silicon Vertex Detector in order to cope with the physics requirements for LEP200. The new detector consists of a barrel section with three layers of microstrip detectors and a forward extension made of hybrid pixel and large pitch strip detectors. The layout of the detector and the techniques used for the different parts of the new silicon detector shall be described.

  5. Oxygen defect processes in silicon and silicon germanium

    KAUST Repository

    Chroneos, A.

    2015-06-18

    Silicon and silicon germanium are the archetypical elemental and alloy semiconductor materials for nanoelectronic, sensor, and photovoltaic applications. The investigation of radiation induced defects involving oxygen, carbon, and intrinsic defects is important for the improvement of devices as these defects can have a deleterious impact on the properties of silicon and silicon germanium. In the present review, we mainly focus on oxygen-related defects and the impact of isovalent doping on their properties in silicon and silicon germanium. The efficacy of the isovalent doping strategies to constrain the oxygen-related defects is discussed in view of recent infrared spectroscopy and density functional theory studies.

  6. Silicon-Based Light Sources for Silicon Integrated Circuits

    Directory of Open Access Journals (Sweden)

    L. Pavesi

    2008-01-01

    Full Text Available Silicon the material per excellence for electronics is not used for sourcing light due to the lack of efficient light emitters and lasers. In this review, after having introduced the basics on lasing, I will discuss the physical reasons why silicon is not a laser material and the approaches to make it lasing. I will start with bulk silicon, then I will discuss silicon nanocrystals and Er3+ coupled silicon nanocrystals where significant advances have been done in the past and can be expected in the near future. I will conclude with an optimistic note on silicon lasing.

  7. Oxygen defect processes in silicon and silicon germanium

    Energy Technology Data Exchange (ETDEWEB)

    Chroneos, A., E-mail: alexander.chroneos@imperial.ac.uk [Faculty of Engineering and Computing, Coventry University, Priory Street, Coventry CV1 5FB (United Kingdom); Department of Materials, Imperial College London, London SW7 2BP (United Kingdom); Sgourou, E. N.; Londos, C. A. [Solid State Section, Physics Department, University of Athens, Panepistimiopolis, Zografos, 157 84 Athens (Greece); Schwingenschlögl, U. [PSE Division, KAUST, Thuwal 23955-6900 (Saudi Arabia)

    2015-06-15

    Silicon and silicon germanium are the archetypical elemental and alloy semiconductor materials for nanoelectronic, sensor, and photovoltaic applications. The investigation of radiation induced defects involving oxygen, carbon, and intrinsic defects is important for the improvement of devices as these defects can have a deleterious impact on the properties of silicon and silicon germanium. In the present review, we mainly focus on oxygen-related defects and the impact of isovalent doping on their properties in silicon and silicon germanium. The efficacy of the isovalent doping strategies to constrain the oxygen-related defects is discussed in view of recent infrared spectroscopy and density functional theory studies.

  8. Amorphous silicon crystalline silicon heterojunction solar cells

    CERN Document Server

    Fahrner, Wolfgang Rainer

    2013-01-01

    Amorphous Silicon/Crystalline Silicon Solar Cells deals with some typical properties of heterojunction solar cells, such as their history, the properties and the challenges of the cells, some important measurement tools, some simulation programs and a brief survey of the state of the art, aiming to provide an initial framework in this field and serve as a ready reference for all those interested in the subject. This book helps to "fill in the blanks" on heterojunction solar cells. Readers will receive a comprehensive overview of the principles, structures, processing techniques and the current developmental states of the devices. Prof. Dr. Wolfgang R. Fahrner is a professor at the University of Hagen, Germany and Nanchang University, China.

  9. Bond Angles in the Crystalline Silicon/Silicon Nitride Interface

    Science.gov (United States)

    Leonard, Robert H.; Bachlechner, Martina E.

    2006-03-01

    Silicon nitride deposited on a silicon substrate has major applications in both dielectric layers in microelectronics and as antireflection and passivation coatings in photovoltaic applications. Molecular dynamic simulations are performed to investigate the influence of temperature and rate of externally applied strain on the structural and mechanical properties of the silicon/silicon nitride interface. Bond-angles between various atom types in the system are used to find and understand more about the mechanisms leading to the failure of the crystal. Ideally in crystalline silicon nitride, bond angles of 109.5 occur when a silicon atom is at the vertex and 120 angles occur when a nitrogen atom is at the vertex. The comparison of the calculated angles to the ideal values give information on the mechanisms of failure in silicon/silicon nitride system.

  10. 81例微柱凝胶法交叉配血试验次侧凝集的临床因素分析%Analysis of clinical factors for hypo-side agglutination in 81 cases in cross match blood test with microcolumn gel assay

    Institute of Scientific and Technical Information of China (English)

    蒯迪文; 郭黠

    2009-01-01

    Objective To analyze the etiological factor for hypo-side agglutination in cross match blood test(CMT)with microcolumn gel assay,and to provide a guide to the clinical blood transfusion.Methods The data were collected and analyzed about 81 cases with hypo-side agglutination in CMT with microcolumn gel assay and direct antiglobulin test(DAT)positive from Jan.2007 to Oct.2008.Results Among the 81 hype-side agglutinated cases,most were with kidney disease,liver and gall disease,hematologic disease and immunologic disease.Specially,the kidney disease was most,accounting for 16.2%.Conclusion The analysis contributes to disposal in CMT and the safety of clinical blood transfusion.%目的 分析使用微柱凝胶法进行交叉配血试验出现次侧凝集的各种病因,为临床输血提供指导作用.方法 收集本院2007年1月至2008年10月间所有使用微柱凝胶法进行交叉配血试验次侧出现凝集,且患者红细胞直接Coombs试验抗体为阳性的患者并进行统计分析.结果 81例次侧凝集的患者中大部分为肾脏疾病、肝胆疾病、血液疾病以及免疫性疾病,其中又以肾脏疾病最多,占16.2%.结论 本结论对不同疾病的交叉配血试验和安全输血有一定的指导作用.

  11. Performance improvement of silicon solar cells by nanoporous silicon coating

    Directory of Open Access Journals (Sweden)

    Dzhafarov T. D.

    2012-04-01

    Full Text Available In the present paper the method is shown to improve the photovoltaic parameters of screen-printed silicon solar cells by nanoporous silicon film formation on the frontal surface of the cell using the electrochemical etching. The possible mechanisms responsible for observed improvement of silicon solar cell performance are discussed.

  12. Spintronics: Silicon takes a spin

    NARCIS (Netherlands)

    Jansen, Ron

    2007-01-01

    An efficient way to transport electron spins from a ferromagnet into silicon essentially makes silicon magnetic, and provides an exciting step towards integration of magnetism and mainstream semiconductor electronics.

  13. Thick silicon growth techniques

    Science.gov (United States)

    Bates, H. E.; Mlavsky, A. I.; Jewett, D. N.

    1973-01-01

    Hall mobility measurements on a number of single crystal silicon ribbons grown from graphite dies have shown some ribbons to have mobilities consistent with their resistivities. The behavior of other ribbons appears to be explained by the introduction of impurities of the opposite sign. Growth of a small single crystal silicon ribbon has been achieved from a beryllia dia. Residual internal stresses of the order of 7 to 18,000 psi have been determined to exist in some silicon ribbon, particularly those grown at rates in excess of 1 in./min. Growth experiments have continued toward definition of a configuration and parameters to provide a reasonable yield of single crystal ribbons. High vacuum outgassing of graphite dies and evacuation and backfilling of growth chambers have provided significant improvements in surface quality of ribbons grown from graphite dies.

  14. The electrophotonic silicon biosensor

    Science.gov (United States)

    Juan-Colás, José; Parkin, Alison; Dunn, Katherine E.; Scullion, Mark G.; Krauss, Thomas F.; Johnson, Steven D.

    2016-09-01

    The emergence of personalized and stratified medicine requires label-free, low-cost diagnostic technology capable of monitoring multiple disease biomarkers in parallel. Silicon photonic biosensors combine high-sensitivity analysis with scalable, low-cost manufacturing, but they tend to measure only a single biomarker and provide no information about their (bio)chemical activity. Here we introduce an electrochemical silicon photonic sensor capable of highly sensitive and multiparameter profiling of biomarkers. Our electrophotonic technology consists of microring resonators optimally n-doped to support high Q resonances alongside electrochemical processes in situ. The inclusion of electrochemical control enables site-selective immobilization of different biomolecules on individual microrings within a sensor array. The combination of photonic and electrochemical characterization also provides additional quantitative information and unique insight into chemical reactivity that is unavailable with photonic detection alone. By exploiting both the photonic and the electrical properties of silicon, the sensor opens new modalities for sensing on the microscale.

  15. Floating Silicon Method

    Energy Technology Data Exchange (ETDEWEB)

    Kellerman, Peter

    2013-12-21

    The Floating Silicon Method (FSM) project at Applied Materials (formerly Varian Semiconductor Equipment Associates), has been funded, in part, by the DOE under a “Photovoltaic Supply Chain and Cross Cutting Technologies” grant (number DE-EE0000595) for the past four years. The original intent of the project was to develop the FSM process from concept to a commercially viable tool. This new manufacturing equipment would support the photovoltaic industry in following ways: eliminate kerf losses and the consumable costs associated with wafer sawing, allow optimal photovoltaic efficiency by producing high-quality silicon sheets, reduce the cost of assembling photovoltaic modules by creating large-area silicon cells which are free of micro-cracks, and would be a drop-in replacement in existing high efficiency cell production process thereby allowing rapid fan-out into the industry.

  16. Silicon containing copolymers

    CERN Document Server

    Amiri, Sahar; Amiri, Sanam

    2014-01-01

    Silicones have unique properties including thermal oxidative stability, low temperature flow, high compressibility, low surface tension, hydrophobicity and electric properties. These special properties have encouraged the exploration of alternative synthetic routes of well defined controlled microstructures of silicone copolymers, the subject of this Springer Brief. The authors explore the synthesis and characterization of notable block copolymers. Recent advances in controlled radical polymerization techniques leading to the facile synthesis of well-defined silicon based thermo reversible block copolymers?are described along with atom transfer radical polymerization (ATRP), a technique utilized to develop well-defined functional thermo reversible block copolymers. The brief also focuses on Polyrotaxanes and their great potential as stimulus-responsive materials which produce poly (dimethyl siloxane) (PDMS) based thermo reversible block copolymers.

  17. Silicon photonics: optical modulators

    Science.gov (United States)

    Reed, G. T.; Gardes, F. Y.; Hu, Youfang; Thomson, D.; Lever, L.; Kelsall, R.; Ikonic, Z.

    2010-01-01

    Silicon Photonics has the potential to revolutionise a whole raft of application areas. Currently, the main focus is on various forms of optical interconnects as this is a near term bottleneck for the computing industry, and hence a number of companies have also released products onto the market place. The adoption of silicon photonics for mass production will significantly benefit a range of other application areas. One of the key components that will enable silicon photonics to flourish in all of the potential application areas is a high performance optical modulator. An overview is given of the major Si photonics modulator research that has been pursued at the University of Surrey to date as well as a worldwide state of the art showing the trend and technology available. We will show the trend taken toward integration of optical and electronic components with the difficulties that are inherent in such a technology.

  18. Integrated Silicon Optoelectronics

    CERN Document Server

    Zimmermann, Horst K

    2010-01-01

    Integrated Silicon Optoelectronics synthesizes topics from optoelectronics and microelectronics. The book concentrates on silicon as the major base of modern semiconductor devices and circuits. Starting from the basics of optical emission and absorption, as well as from the device physics of photodetectors, the aspects of the integration of photodetectors in modern bipolar, CMOS, and BiCMOS technologies are discussed. Detailed descriptions of fabrication technologies and applications of optoelectronic integrated circuits are included. The book, furthermore, contains a review of the newest state of research on eagerly anticipated silicon light emitters. In order to cover the topics comprehensively, also included are integrated waveguides, gratings, and optoelectronic power devices. Numerous elaborate illustrations facilitate and enhance comprehension. This extended edition will be of value to engineers, physicists, and scientists in industry and at universities. The book is also recommended to graduate student...

  19. Microgravity silicon zoning investigation

    Science.gov (United States)

    Kern, E. L.; Gill, G. L., Jr.

    1985-01-01

    The flow instabilities in floating zones of silicon were investigated and methods for investigation of these instabilities in microgravity were defined. Three principal tasks were involved: (1) characterization of the float zone in small diameter rods; (2) investigation of melt flow instabilities in circular melts in silicon disks; and (3) the development of a prototype of an apparatus that could be used in near term space experiments to investigate flow instabilities in a molten zone. It is shown that in a resistance heated zoner with 4 to 7 mm diameter silicon rods that the critical Marangoni number is about 1480 compared to a predicted value of 14 indicative that viable space experiments might be performed. The prototype float zone apparatus is built and specifications are prepared for a flight zoner should a decision be reached to proceed with a space flight experimental investigation.

  20. The LHCb Silicon Tracker

    Energy Technology Data Exchange (ETDEWEB)

    Tobin, Mark, E-mail: Mark.Tobin@epfl.ch

    2016-09-21

    The LHCb experiment is dedicated to the study of heavy flavour physics at the Large Hadron Collider (LHC). The primary goal of the experiment is to search for indirect evidence of new physics via measurements of CP violation and rare decays of beauty and charm hadrons. The LHCb detector has a large-area silicon micro-strip detector located upstream of a dipole magnet, and three tracking stations with silicon micro-strip detectors in the innermost region downstream of the magnet. These two sub-detectors form the LHCb Silicon Tracker (ST). This paper gives an overview of the performance and operation of the ST during LHC Run 1. Measurements of the observed radiation damage are shown and compared to the expectation from simulation.

  1. Neuromorphic silicon neuron circuits

    Directory of Open Access Journals (Sweden)

    Giacomo eIndiveri

    2011-05-01

    Full Text Available Hardware implementations of spiking neurons can be extremely useful for a large variety of applications, ranging from high-speed modeling of large-scale neural systems to real-time behaving systems, to bidirectional brain-machine interfaces. The specific circuit solutions used to implement silicon neurons depend on the application requirements. In this paper we describe the most common building blocks and techniques used to implement these circuits, and present an overview of a wide range of neuromorphic silicon neurons, which implement different computational models, ranging from biophysically realistic and conductance based Hodgkin-Huxley models to bi-dimensional generalized adaptive Integrate and Fire models. We compare the different design methodologies used for each silicon neuron design described, and demonstrate their features with experimental results, measured from a wide range of fabricated VLSI chips.

  2. The electrophotonic silicon biosensor

    Science.gov (United States)

    Juan-Colás, José; Parkin, Alison; Dunn, Katherine E.; Scullion, Mark G.; Krauss, Thomas F.; Johnson, Steven D.

    2016-01-01

    The emergence of personalized and stratified medicine requires label-free, low-cost diagnostic technology capable of monitoring multiple disease biomarkers in parallel. Silicon photonic biosensors combine high-sensitivity analysis with scalable, low-cost manufacturing, but they tend to measure only a single biomarker and provide no information about their (bio)chemical activity. Here we introduce an electrochemical silicon photonic sensor capable of highly sensitive and multiparameter profiling of biomarkers. Our electrophotonic technology consists of microring resonators optimally n-doped to support high Q resonances alongside electrochemical processes in situ. The inclusion of electrochemical control enables site-selective immobilization of different biomolecules on individual microrings within a sensor array. The combination of photonic and electrochemical characterization also provides additional quantitative information and unique insight into chemical reactivity that is unavailable with photonic detection alone. By exploiting both the photonic and the electrical properties of silicon, the sensor opens new modalities for sensing on the microscale. PMID:27624590

  3. Silicon microphones - a Danish perspective

    DEFF Research Database (Denmark)

    Bouwstra, Siebe; Storgaard-Larsen, Torben; Scheeper, Patrick

    1998-01-01

    Two application areas of microphones are discussed, those for precision measurement and those for hearing instruments. Silicon microphones are under investigation for both areas, and Danish industry plays a key role in both. The opportunities of silicon, as well as the challenges and expectations......, are discussed. For precision measurement the challenge for silicon is large, while for hearing instruments silicon seems to be very promising....

  4. The Silicon Cube detector

    Energy Technology Data Exchange (ETDEWEB)

    Matea, I.; Adimi, N. [Centre d' Etudes Nucleaires de Bordeaux Gradignan - Universite Bordeaux 1 - UMR 5797, CNRS/IN2P3, Chemin du Solarium, BP 120, F-33175 Gradignan Cedex (France); Blank, B. [Centre d' Etudes Nucleaires de Bordeaux Gradignan - Universite Bordeaux 1 - UMR 5797, CNRS/IN2P3, Chemin du Solarium, BP 120, F-33175 Gradignan Cedex (France)], E-mail: blank@cenbg.in2p3.fr; Canchel, G.; Giovinazzo, J. [Centre d' Etudes Nucleaires de Bordeaux Gradignan - Universite Bordeaux 1 - UMR 5797, CNRS/IN2P3, Chemin du Solarium, BP 120, F-33175 Gradignan Cedex (France); Borge, M.J.G.; Dominguez-Reyes, R.; Tengblad, O. [Insto. Estructura de la Materia, CSIC, Serrano 113bis, E-28006 Madrid (Spain); Thomas, J.-C. [GANIL, CEA/DSM - CNRS/IN2P3, BP 55027, F-14076 Caen Cedex 5 (France)

    2009-08-21

    A new experimental device, the Silicon Cube detector, consisting of six double-sided silicon strip detectors placed in a compact geometry was developed at CENBG. Having a very good angular coverage and high granularity, it allows simultaneous measurements of energy and angular distributions of charged particles emitted from unbound nuclear states. In addition, large-volume Germanium detectors can be placed close to the collection point of the radioactive species to be studied. The setup is ideally suited for isotope separation on-line (ISOL)-type experiments to study multi-particle emitters and was tested during an experiment at the low-energy beam line of SPIRAL at GANIL.

  5. CMS silicon tracker developments

    Energy Technology Data Exchange (ETDEWEB)

    Civinini, C. E-mail: carlo.civinini@fi.infn.it; Albergo, S.; Angarano, M.; Azzi, P.; Babucci, E.; Bacchetta, N.; Bader, A.; Bagliesi, G.; Basti, A.; Biggeri, U.; Bilei, G.M.; Bisello, D.; Boemi, D.; Bosi, F.; Borrello, L.; Bozzi, C.; Braibant, S.; Breuker, H.; Bruzzi, M.; Buffini, A.; Busoni, S.; Candelori, A.; Caner, A.; Castaldi, R.; Castro, A.; Catacchini, E.; Checcucci, B.; Ciampolini, P.; Creanza, D.; D' Alessandro, R.; Da Rold, M.; Demaria, N.; De Palma, M.; Dell' Orso, R.; Della Marina, R.D.R.; Dutta, S.; Eklund, C.; Feld, L.; Fiore, L.; Focardi, E.; French, M.; Freudenreich, K.; Frey, A.; Fuertjes, A.; Giassi, A.; Giorgi, M.; Giraldo, A.; Glessing, B.; Gu, W.H.; Hall, G.; Hammarstrom, R.; Hebbeker, T.; Honma, A.; Hrubec, J.; Huhtinen, M.; Kaminsky, A.; Karimaki, V.; Koenig, St.; Krammer, M.; Lariccia, P.; Lenzi, M.; Loreti, M.; Luebelsmeyer, K.; Lustermann, W.; Maettig, P.; Maggi, G.; Mannelli, M.; Mantovani, G.; Marchioro, A.; Mariotti, C.; Martignon, G.; Evoy, B. Mc; Meschini, M.; Messineo, A.; Migliore, E.; My, S.; Paccagnella, A.; Palla, F.; Pandoulas, D.; Papi, A.; Parrini, G.; Passeri, D.; Pieri, M.; Piperov, S.; Potenza, R.; Radicci, V.; Raffaelli, F.; Raymond, M.; Santocchia, A.; Schmitt, B.; Selvaggi, G.; Servoli, L.; Sguazzoni, G.; Siedling, R.; Silvestris, L.; Starodumov, A.; Stavitski, I.; Stefanini, G.; Surrow, B.; Tempesta, P.; Tonelli, G.; Tricomi, A.; Tuuva, T.; Vannini, C.; Verdini, P.G.; Viertel, G.; Xie, Z.; Yahong, Li; Watts, S.; Wittmer, B

    2002-01-21

    The CMS Silicon tracker consists of 70 m{sup 2} of microstrip sensors which design will be finalized at the end of 1999 on the basis of systematic studies of device characteristics as function of the most important parameters. A fundamental constraint comes from the fact that the detector has to be operated in a very hostile radiation environment with full efficiency. We present an overview of the current results and prospects for converging on a final set of parameters for the silicon tracker sensors.

  6. CMS silicon tracker developments

    CERN Document Server

    Civinini, C; Angarano, M M; Azzi, P; Babucci, E; Bacchetta, N; Bader, A; Bagliesi, G; Basti, A; Biggeri, U; Bilei, G M; Bisello, D; Boemi, D; Bosi, F; Borrello, L; Bozzi, C; Braibant, S; Breuker, Horst; Bruzzi, Mara; Buffini, A; Busoni, S; Candelori, A; Caner, A; Castaldi, R; Castro, A; Catacchini, E; Checcucci, B; Ciampolini, P; Creanza, D; D'Alessandro, R; Da Rold, M; Demaria, N; De Palma, M; Dell'Orso, R; Della Marina, R; Dutta, S; Eklund, C; Feld, L; Fiore, L; Focardi, E; French, M; Freudenreich, Klaus; Frey, A; Fürtjes, A; Giassi, A; Giorgi, M; Giraldo, A; Glessing, B; Gu, W H; Hall, G; Hammarström, R; Hebbeker, T; Honma, A; Hrubec, Josef; Huhtinen, M; Kaminski, A; Karimäki, V; König, S; Krammer, Manfred; Lariccia, P; Lenzi, M; Loreti, M; Lübelsmeyer, K; Lustermann, W; Mättig, P; Maggi, G; Mannelli, M; Mantovani, G C; Marchioro, A; Mariotti, C; Martignon, G; McEvoy, B; Meschini, M; Messineo, A; Migliore, E; My, S; Paccagnella, A; Palla, Fabrizio; Pandoulas, D; Papi, A; Parrini, G; Passeri, D; Pieri, M; Piperov, S; Potenza, R; Radicci, V; Raffaelli, F; Raymond, M; Santocchia, A; Schmitt, B; Selvaggi, G; Servoli, L; Sguazzoni, G; Siedling, R; Silvestris, L; Starodumov, Andrei; Stavitski, I; Stefanini, G; Surrow, B; Tempesta, P; Tonelli, G; Tricomi, A; Tuuva, T; Vannini, C; Verdini, P G; Viertel, Gert M; Xie, Z; Li Ya Hong; Watts, S; Wittmer, B

    2002-01-01

    The CMS Silicon tracker consists of 70 m/sup 2/ of microstrip sensors which design will be finalized at the end of 1999 on the basis of systematic studies of device characteristics as function of the most important parameters. A fundamental constraint comes from the fact that the detector has to be operated in a very hostile radiation environment with full efficiency. We present an overview of the current results and prospects for converging on a final set of parameters for the silicon tracker sensors. (9 refs).

  7. Irradiation Defects in Silicon Crystal

    Institute of Scientific and Technical Information of China (English)

    2003-01-01

    The application of irradiation in silicon crystal is introduced.The defects caused by irradiation are reviewed and some major ways of studying defects in irradiated silicon are summarized.Furthermore the problems in the investigation of irradiated silicon are discussed as well as its properties.

  8. Silicon carbide reinforced silicon carbide composite

    Science.gov (United States)

    Lau, Sai-Kwing (Inventor); Calandra, Salvatore J. (Inventor); Ohnsorg, Roger W. (Inventor)

    2001-01-01

    This invention relates to a process comprising the steps of: a) providing a fiber preform comprising a non-oxide ceramic fiber with at least one coating, the coating comprising a coating element selected from the group consisting of carbon, nitrogen, aluminum and titanium, and the fiber having a degradation temperature of between 1400.degree. C. and 1450.degree. C., b) impregnating the preform with a slurry comprising silicon carbide particles and between 0.1 wt % and 3 wt % added carbon c) providing a cover mix comprising: i) an alloy comprising a metallic infiltrant and the coating element, and ii) a resin, d) placing the cover mix on at least a portion of the surface of the porous silicon carbide body, e) heating the cover mix to a temperature between 1410.degree. C. and 1450.degree. C. to melt the alloy, and f) infiltrating the fiber preform with the melted alloy for a time period of between 15 minutes and 240 minutes, to produce a ceramic fiber reinforced ceramic composite.

  9. Pair distribution functions of silicon/silicon nitride interfaces

    Science.gov (United States)

    Cao, Deng; Bachlechner, Martina E.

    2006-03-01

    Using molecular dynamics simulations, we investigate different mechanical and structural properties of the silicon/silicon nitride interface. One way to characterize the structure as tensile strain is applied parallel to the interface is to calculate pair distribution functions for specific atom types. The pair distribution function gives the probability of finding a pair of atoms a distance r apart, relative to the probability expected for a completely random distribution at the same density. The pair distribution functions for bulk silicon nitride reflect the fracture of the silicon nitride film at about 8 % and the fact that the centerpiece of the silicon nitride film returns to its original structure after fracture. The pair distribution functions for interface silicon atoms reveal the formation of bonds for originally unbound atom pairs, which is indicative of the interstitial-vacancy defect that causes failure in silicon.

  10. Surface and morphological features of laser-irradiated silicon under vacuum, nitrogen and ethanol

    Science.gov (United States)

    Hayat, Asma; Bashir, Shazia; Akram, Mahreen; Mahmood, Khaliq; Iqbal, Muhammad Hassan

    2015-12-01

    Laser-induced surface and structural modification of silicon (Si) has been investigated under three different environments of vacuum, nitrogen (100 Torr) and ethanol. The interaction of 1000 pulses of KrF (λ ≈ 248 nm, τ ≈ 18 ns, repetition rate ≈ 30 Hz) Excimer laser at two different fluences of 2.8 J/cm2 and 4 J/cm2 resulted in formation of various kinds of features such as laser induced periodic surface structures (LIPSS), spikes, columns, cones and cracks. Surface morphology has been observed by Scanning Electron Microscope (SEM). Whereas, structural modification of irradiated targets is explored by Raman spectroscopy. SEM analysis exhibits a non-uniform distribution of micro-scale pillars and spikes at the central ablated regime of silicon irradiated at low laser fluence of 2.8 J/cm2 under vacuum. Whereas cones, pits, cavities and ripples like features are seen at the boundaries. At higher fluence of 4 J/cm2, laser induced periodic structures as well as micro-columns are observed. In the case of ablation in nitrogen environment, melting, splashing, self-organized granular structures and cracks along with redeposition are observed at lower fluence. Such types of small scaled structures in nitrogen are attributed to confinement and shielding effects of nitrogen plasma. Whereas, a crater with multiple ablative layers is formed in the case of ablation at higher fluence. Significantly different surface morphology of Si is observed in the case of ablation in ethanol. It reveals the formation of cavities along with small scale pores and less redeposition. These results reveal that the growth of surface and morphological features of irradiated Si are strongly dependent upon the laser fluence as well as environmental conditions. The difference in surface morphology is attributable to cooling, confinement and shielding effects as well as difference in plasma temperature, density and pressure of environmental media that corresponds to different energy deposition

  11. Surface and morphological features of laser-irradiated silicon under vacuum, nitrogen and ethanol

    Energy Technology Data Exchange (ETDEWEB)

    Hayat, Asma, E-mail: asmahayat@gcu.edu.pk; Bashir, Shazia; Akram, Mahreen; Mahmood, Khaliq; Iqbal, Muhammad Hassan

    2015-12-01

    Highlights: • Laser irradiation effects on Si surface have been explored. • An Excimer Laser was used as a source. • SEM analysis was performed to explore surface morphology. • Raman spectroscopy analysis was carried out to find crystallographical alterations. - Abstract: Laser-induced surface and structural modification of silicon (Si) has been investigated under three different environments of vacuum, nitrogen (100 Torr) and ethanol. The interaction of 1000 pulses of KrF (λ ≈ 248 nm, τ ≈ 18 ns, repetition rate ≈ 30 Hz) Excimer laser at two different fluences of 2.8 J/cm{sup 2} and 4 J/cm{sup 2} resulted in formation of various kinds of features such as laser induced periodic surface structures (LIPSS), spikes, columns, cones and cracks. Surface morphology has been observed by Scanning Electron Microscope (SEM). Whereas, structural modification of irradiated targets is explored by Raman spectroscopy. SEM analysis exhibits a non-uniform distribution of micro-scale pillars and spikes at the central ablated regime of silicon irradiated at low laser fluence of 2.8 J/cm{sup 2} under vacuum. Whereas cones, pits, cavities and ripples like features are seen at the boundaries. At higher fluence of 4 J/cm{sup 2}, laser induced periodic structures as well as micro-columns are observed. In the case of ablation in nitrogen environment, melting, splashing, self-organized granular structures and cracks along with redeposition are observed at lower fluence. Such types of small scaled structures in nitrogen are attributed to confinement and shielding effects of nitrogen plasma. Whereas, a crater with multiple ablative layers is formed in the case of ablation at higher fluence. Significantly different surface morphology of Si is observed in the case of ablation in ethanol. It reveals the formation of cavities along with small scale pores and less redeposition. These results reveal that the growth of surface and morphological features of irradiated Si are strongly

  12. Advances in silicon nanophotonics

    DEFF Research Database (Denmark)

    Hvam, Jørn Märcher; Pu, Minhao

    has been an obstacle for a simple realization of electro-optic modulators, and its indirect band gap has prevented the realization of efficient silicon light emitting diodes and lasers. Still, significant progress has been made in the past few years. Electro-optic modulators based on the free carrier...

  13. ALICE Silicon Strip Detector

    CERN Multimedia

    Nooren, G

    2013-01-01

    The Silicon Strip Detector (SSD) constitutes the two outermost layers of the Inner Tracking System (ITS) of the ALICE Experiment. The SSD plays a crucial role in the tracking of the particles produced in the collisions connecting the tracks from the external detectors (Time Projection Chamber) to the ITS. The SSD also contributes to the particle identification through the measurement of their energy loss.

  14. On nanostructured silicon success

    DEFF Research Database (Denmark)

    Sigmund, Ole; Jensen, Jakob Søndergaard; Frandsen, Lars Hagedorn

    2016-01-01

    Recent Letters by Piggott et al. 1 and Shen et al. 2 claim the smallest ever dielectric wave length and polarization splitters. The associated News & Views article by Aydin3 states that these works “are the first experimental demonstration of on-chip, silicon photonic components based on complex...

  15. Silicon Valley's Turnaround

    Institute of Scientific and Technical Information of China (English)

    Joseph Leu

    2006-01-01

    @@ During Silicon Valley's dramatic economic growth fueled by the Internet boom and business investment in information technology, employment in the region's high-tech sec tor tripled between 1995 and 2000. The economic boom gave rise to many new firms,drawing em ployees into high-tech jobs from other regions and other industries.

  16. Characterization of Silicon Carbide.

    Science.gov (United States)

    The various electrical and structural measurement techniques for silicon carbide are described. The electrical measurements include conductivity, resistivity, carrier concentration, mobility, doping energy levels, and lifetime. The structural measurements include polytype determination and crystalline perfection. Both bulk and epitaxial films are included.

  17. Composition Comprising Silicon Carbide

    Science.gov (United States)

    Mehregany, Mehran (Inventor); Zorman, Christian A. (Inventor); Fu, Xiao-An (Inventor); Dunning, Jeremy L. (Inventor)

    2012-01-01

    A method of depositing a ceramic film, particularly a silicon carbide film, on a substrate is disclosed in which the residual stress, residual stress gradient, and resistivity are controlled. Also disclosed are substrates having a deposited film with these controlled properties and devices, particularly MEMS and NEMS devices, having substrates with films having these properties.

  18. ALICE Silicon Pixel Detector

    CERN Multimedia

    Manzari, V

    2013-01-01

    The Silicon Pixel Detector (SPD) forms the innermost two layers of the 6-layer barrel Inner Tracking System (ITS). The SPD plays a key role in the determination of the position of the primary collision and in the reconstruction of the secondary vertices from particle decays.

  19. OPAL Silicon Tungsten Luminometer

    CERN Multimedia

    OPAL was one of the four experiments installed at the LEP particle accelerator from 1989 - 2000. The Silicon Tungsten Luminometer was part of OPAL's calorimeter which was used to measure the energy of particles. Most particles end their journey in calorimeters. These detectors measure the energy deposited when particles are slowed down and stopped.

  20. Silicon in beer and brewing.

    Science.gov (United States)

    Casey, Troy R; Bamforth, Charles W

    2010-04-15

    It has been claimed that beer is one of the richest sources of silicon in the diet; however, little is known of the relationship between silicon content and beer style and the manner in which beer is produced. The purpose of this study was to measure silicon in a diversity of beers and ascertain the grist selection and brewing factors that impact the level of silicon obtained in beer. Commercial beers ranged from 6.4 to 56.5 mg L(-1) in silicon. Products derived from a grist of barley tended to contain more silicon than did those from a wheat-based grist, likely because of the high levels of silica in the retained husk layer of barley. Hops contain substantially more silicon than does grain, but quantitatively hops make a much smaller contribution than malt to the production of beer and therefore relatively less silicon in beer derives from them. During brewing the vast majority of the silicon remains with the spent grains; however, aggressive treatment during wort production in the brewhouse leads to increased extraction of silicon into wort and much of this survives into beer. It is confirmed that beer is a very rich source of silicon. (c) 2010 Society of Chemical Industry.

  1. 微柱凝胶法检测ABO疑难血型的临床应用%Clinical Application and Methodology Study on Micro-column Gel Technique in Detecting Suspicious ABO Blood Group

    Institute of Scientific and Technical Information of China (English)

    肖倩; 辛荣传; 周益强; 辛康

    2009-01-01

    目的 探讨微柱凝胶法(MGT)检测ABO疑难血型的敏感性及影响因素.方法 应用(MGT)法检测38 600例患者的ABO血型,同时用试管法进行复查对照,对正反定结果不一致的血标本,增加离心或37℃孵育时间去除血清中的纤维蛋白和冷凝集素,对血型抗原明显减弱或抗体效价降低者,采用增加定型血清或被检血清的剂量,预先将抗原抗体混合置37℃反应15-30 min,然后采用(MGT)法检测.结果 MGT法检测ABO血型抗原明显减弱或抗体效价降低者的敏感性高于试管法.MGT法检测ABO血型,对正反定结果不一致者35例,其中患者血浆含纤维蛋白9例、血清蛋白异常增高4例、高效价冷凝集素5例、血型抗原明显减弱8例、抗体效价降低9例.结论 纤维蛋白、高效价冷凝集素、血型抗原减弱或抗体效价降低均可干扰ABO血型鉴定结果.增加离心或37℃孵育时间去除定型血清或患者血浆剂量血清中的纤维蛋白和冷凝集素,增加定型血清或患者血浆的剂量,预先将抗原抗体混合置37℃反应15-30分钟,然后采用MGT法检测,可提高ABO血型鉴定的准确性和输血安全.%Objective To discuss the sensitivity and influencing factors of micro-column gel technique (MGT) in detecting suspicious ABO blood group.Methods A method of MGT was applied to detecting suspicious ABO blood group of 38600 patients,simultaneously, a test tube method was used to reexamine and contrast,centrifugation or 37 DEG C incubation time was increased to remove fibrin and cold agglutinin in serum as for blood samples whose positive and negative definite results were not consistent, a method for increasing doses of typing serum or detected serum was adopted as for the patients whose blood group antigen was prominently weakened or antibody titer was decreased, antigen-antibody was mixed in 37 DEG C and reacted for 15 to 30 minutes in advance, and then the method of MGT was adopted to detect.Results The

  2. Investigation on Silicon Thin Film Solar Cells

    Institute of Scientific and Technical Information of China (English)

    2003-01-01

    The preparation, current status and trends are investigated for silicon thin film solar cells. The advantages and disadvantages of amorphous silicon thin film, polycrystalline silicon thin film and mono-crystalline silicon thin film solar cells are compared. The future development trends are pointed out. It is found that polycrystalline silicon thin film solar cells will be more promising for application with great potential.

  3. A silicon electromechanical photodetector

    CERN Document Server

    Tallur, Siddharth

    2013-01-01

    Opto-mechanical systems have enabled wide-band optical frequency conversion and multi-channel all-optical radio frequency amplification. Realization of an on-chip silicon communication platform is limited by photodetectors needed to convert optical information to electrical signals for further signal processing. In this paper we present a coupled silicon micro-resonator, which converts near-IR optical intensity modulation at 174.2MHz and 1.198GHz into motional electrical current. This device emulates a photodetector which detects intensity modulation of continuous wave laser light in the full-width-at-half-maximum bandwidth of the mechanical resonance. The resonant principle of operation eliminates dark current challenges associated with convetional photodetectors.

  4. The CMS silicon tracker

    Energy Technology Data Exchange (ETDEWEB)

    Focardi, E. E-mail: focardi@pi.infn.it; Albergo, S.; Angarano, M.; Azzi, P.; Babucci, E.; Bacchetta, N.; Bader, A.; Bagliesi, G.; Basti, A.; Biggeri, U.; Bilei, G.M.; Bisello, D.; Boemi, D.; Bosi, F.; Borrello, L.; Bozzi, C.; Braibant, S.; Breuker, H.; Bruzzi, M.; Buffini, A.; Busoni, S.; Candelori, A.; Caner, A.; Castaldi, R.; Castro, A.; Catacchini, E.; Checcucci, B; Ciampolini, P.; Civinini, C.; Creanza, D.; D' Alessandro, R.; Da Rold, M.; Demaria, N.; De Palma, M.; Dell' Orso, R.; Della Marina, R.; Dutta, S.; Eklund, C.; Feld, L.; Fiore, L.; French, M.; Freudenreich, K.; Frey, A.; Fuertjes, A.; Giassi, A.; Giorgi, M.; Giraldo, A.; Glessing, B.; Gu, W.H.; Hall, G.; Hammarstrom, R.; Hebbeker, T.; Honma, A.; Hrubec, J.; Huhtinen, M.; Kaminsky, A.; Karimaki, V.; Koenig, St.; Krammer, M.; Lariccia, P.; Lenzi, M.; Loreti, M.; Leubelsmeyer, K.; Lustermann, W.; Maettig, P.; Maggi, G.; Mannelli, M.; Mantovani, G.; Marchioro, A.; Mariotti, C.; Martignon, G.; Evoy, B.Mc; Meschini, M.; Messineo, A.; Migliore, E.; My, S.; Paccagnella, A.; Palla, F.; Pandoulas, D.; Papi, A.; Parrini, G.; Passeri, D.; Pieri, M.; Piperov, S.; Potenza, R.; Radicci, V.; Raffaelli, F.; Raymond, M.; Rizzo, F.; Santocchia, A.; Schmitt, B.; Selvaggi, G.; Servoli, L.; Sguazzoni, G.; Siedling, R.; Silvestris, L.; Starodumov, A.; Stavitski, I.; Stefanini, G.; Surrow, B.; Tempesta, P.; Tonelli, G.; Tricomi, A.; Tuuva, T.; Vannini, C.; Verdini, P.G.; Viertel, G.; Xie, Z.; Yahong, Li; Watts, S.; Wittmer, B

    2000-10-11

    This paper describes the Silicon microstrip Tracker of the CMS experiment at LHC. It consists of a barrel part with 5 layers and two endcaps with 10 disks each. About 10 000 single-sided equivalent modules have to be built, each one carrying two daisy-chained silicon detectors and their front-end electronics. Back-to-back modules are used to read-out the radial coordinate. The tracker will be operated in an environment kept at a temperature of T=-10 deg. C to minimize the Si sensors radiation damage. Heavily irradiated detectors will be safely operated due to the high-voltage capability of the sensors. Full-size mechanical prototypes have been built to check the system aspects before starting the construction.

  5. Superhydrophobic Porous Silicon Surfaces

    Directory of Open Access Journals (Sweden)

    Paolo NENZI

    2011-12-01

    Full Text Available In this paper, we present an inexpensive technique to produce superhydrophobic surfaces from porous silicon. Superhydrophobic surfaces are a key technology for their ability to reduce friction losses in microchannels and their self cleaning properties. The morphology of a p-type silicon wafer is modified by a electrochemical wet etch to produce pores with controlled size and distribution and coated with a silane hydrophobic layer. Surface morphology is characterized by means of scanning electron microscope images. Large contact angles are observed on such surfaces and the results are compared with classical wetting models (Cassie and Wenzel suggesting a mixed Wenzel-Cassie behavior. The presented technique represents a cost-effective means for friction reduction in microfluidic applications, such as lab-on-a-chip.

  6. Electron beam silicon purification

    Energy Technology Data Exchange (ETDEWEB)

    Kravtsov, Anatoly [SIA ' ' KEPP EU' ' , Riga (Latvia); Kravtsov, Alexey [' ' KEPP-service' ' Ltd., Moscow (Russian Federation)

    2014-11-15

    Purification of heavily doped electronic grade silicon by evaporation of N-type impurities with electron beam heating was investigated in process with a batch weight up to 50 kilos. Effective temperature of the melt, an indicative parameter suitable for purification process characterization was calculated and appeared to be stable for different load weight processes. Purified material was successfully approbated in standard CZ processes of three different companies. Each company used its standard process and obtained CZ monocrystals applicable for photovoltaic application. These facts enable process to be successfully scaled up to commercial volumes (150-300 kg) and yield solar grade silicon. (copyright 2014 WILEY-VCH Verlag GmbH and Co. KGaA, Weinheim) (orig.)

  7. Haematic silicon in drowning.

    Science.gov (United States)

    Pierucci, Giovanni; Merlano, Federica; Chen, Yao; Sturini, Michela; Maraschi, Federica; Profumo, Antonella

    2016-04-01

    The aim of this paper was to evaluate silicon (Si) concentration in human whole ventricular blood as a further potential chemical marker in the diagnosis of drowning. We employed an acidic digestion for the extraction of soluble Si, and an alkaline digestion for the determination of total Si, including particulate matter, both arising from drowning medium. 29 suspected drowning situations, 24 in fresh water (Fw) and 5 in seawater (Sw), were examined. The difference in Si concentration between the left and right ventricular blood (Si ΔL-R) was measured and alkaline Si ΔL-R seems, indeed, a potentially significant complementary tool in the diagnosis of Fw drowning, because insoluble silicon fraction does not undergo hemo-dilution or hemo-concentration, and the ΔL-R is not affected by exogenous factors. In spite of the limited number of cases investigated, a good correlation was observed between the analytical results and the macro-microscopic autoptic findings.

  8. Silicon nanowire transistors

    CERN Document Server

    Bindal, Ahmet

    2016-01-01

    This book describes the n and p-channel Silicon Nanowire Transistor (SNT) designs with single and dual-work functions, emphasizing low static and dynamic power consumption. The authors describe a process flow for fabrication and generate SPICE models for building various digital and analog circuits. These include an SRAM, a baseband spread spectrum transmitter, a neuron cell and a Field Programmable Gate Array (FPGA) platform in the digital domain, as well as high bandwidth single-stage and operational amplifiers, RF communication circuits in the analog domain, in order to show this technology’s true potential for the next generation VLSI. Describes Silicon Nanowire (SNW) Transistors, as vertically constructed MOS n and p-channel transistors, with low static and dynamic power consumption and small layout footprint; Targets System-on-Chip (SoC) design, supporting very high transistor count (ULSI), minimal power consumption requiring inexpensive substrates for packaging; Enables fabrication of different types...

  9. Building China's Silicon Valley

    Institute of Scientific and Technical Information of China (English)

    2008-01-01

    @@ Ellis Rahhal and Andrew Schorr sit across from each other in the minimalist office of their tech startup,all clean lines and white linoleum floors.A pair of toothbrushes hint at many a late night hunched over their computers.Outside the window,the sun is slowly setting behind jagged mountains.The scene is classic Silicon Valley.But Rahhal and Schorr aren't in California.They're in suburban Beijing.

  10. Silicon Containing Photoresists.

    Science.gov (United States)

    1987-11-13

    generation of high resolution patterns. The vast majority of the commercial positive photoresists are comprised of a base soluble Novolac type resin (Cresol...plays a passive role. The generation of silicon containing Novolac- type resins represents one such effort. Workers at AT&T Bell Labs have prepared a...and formaldehyde (20). The silylated Novolac type resins were designed for use with substituted 1,2-napthoquinone-2-diazide sensitizers employed in

  11. Bringing Silicon Valley inside.

    Science.gov (United States)

    Hamel, G

    1999-01-01

    In 1998, Silicon Valley companies produced 41 IPOs, which by January 1999 had a combined market capitalization of $27 billion--that works out to $54,000 in new wealth creation per worker in a single year. Multiply the number of employees in your company by $54,000. Did your business create that much new wealth last year? Half that amount? It's not a group of geniuses generating such riches. It's a business model. In Silicon Valley, ideas, capital, and talent circulate freely, gathering into whatever combinations are most likely to generate innovation and wealth. Unlike most traditional companies, which spend their energy in resource allocation--a system designed to avoid failure--the Valley operates through resource attraction--a system that nurtures innovation. In a traditional company, people with innovative ideas must go hat in hand to the guardians of the old ideas for funding and for staff. But in Silicon Valley, a slew of venture capitalists vie to attract the best new ideas, infusing relatively small amounts of capital into a portfolio of ventures. And talent is free to go to the companies offering the most exhilarating work and the greatest potential rewards. It should actually be easier for large, traditional companies to set up similar markets for capital, ideas, and talent internally. After all, big companies often already have extensive capital, marketing, and distribution resources, and a first crack at the talent in their own ranks. And some of them are doing it. The choice is yours--you can do your best to make sure you never put a dollar of capital at risk, or you can tap into the kind of wealth that's being created every day in Silicon Valley.

  12. Silicon photonics manufacturing.

    Science.gov (United States)

    Zortman, William A; Trotter, Douglas C; Watts, Michael R

    2010-11-08

    Most demonstrations in silicon photonics are done with single devices that are targeted for use in future systems. One of the costs of operating multiple devices concurrently on a chip in a system application is the power needed to properly space resonant device frequencies on a system's frequency grid. We asses this power requirement by quantifying the source and impact of process induced resonant frequency variation for microdisk resonators across individual die, entire wafers and wafer lots for separate process runs. Additionally we introduce a new technique, utilizing the Transverse Electric (TE) and Transverse Magnetic (TM) modes in microdisks, to extract thickness and width variations across wafers and dice. Through our analysis we find that a standard six inch Silicon on Insulator (SOI) 0.35 μm process controls microdisk resonant frequencies for the TE fundamental resonances to within 1 THz across a wafer and 105 GHz within a single die. Based on demonstrated thermal tuner technology, a stable manufacturing process exhibiting this level of variation can limit the resonance trimming power per resonant device to 231 μW. Taken in conjunction with the power to compensate for thermal environmental variations, the expected power requirement to compensate for fabrication-induced non-uniformities is 17% of that total. This leads to the prediction that thermal tuning efficiency is likely to have the most dominant impact on the overall power budget of silicon photonics resonator technology.

  13. Silicon photonics fundamentals and devices

    CERN Document Server

    Deen, M Jamal

    2012-01-01

    The creation of affordable high speed optical communications using standard semiconductor manufacturing technology is a principal aim of silicon photonics research. This would involve replacing copper connections with optical fibres or waveguides, and electrons with photons. With applications such as telecommunications and information processing, light detection, spectroscopy, holography and robotics, silicon photonics has the potential to revolutionise electronic-only systems. Providing an overview of the physics, technology and device operation of photonic devices using exclusively silicon and related alloys, the book includes: * Basic Properties of Silicon * Quantum Wells, Wires, Dots and Superlattices * Absorption Processes in Semiconductors * Light Emitters in Silicon * Photodetectors , Photodiodes and Phototransistors * Raman Lasers including Raman Scattering * Guided Lightwaves * Planar Waveguide Devices * Fabrication Techniques and Material Systems Silicon Photonics: Fundamentals and Devices outlines ...

  14. Stabilization of elusive silicon oxides.

    Science.gov (United States)

    Wang, Yuzhong; Chen, Mingwei; Xie, Yaoming; Wei, Pingrong; Schaefer, Henry F; Schleyer, Paul von R; Robinson, Gregory H

    2015-06-01

    Molecular SiO2 and other simple silicon oxides have remained elusive despite the indispensable use of silicon dioxide materials in advanced electronic devices. Owing to the great reactivity of silicon-oxygen double bonds, as well as the low oxidation state of silicon atoms, the chemistry of simple silicon oxides is essentially unknown. We now report that the soluble disilicon compound, L:Si=Si:L (where L: = :C{N(2,6-(i)Pr2C6H3)CH}2), can be directly oxidized by N2O and O2 to give the carbene-stabilized Si2O3 and Si2O4 moieties, respectively. The nature of the silicon oxide units in these compounds is probed by spectroscopic methods, complementary computations and single-crystal X-ray diffraction.

  15. Radiation Hardening of Silicon Detectors

    CERN Multimedia

    Leroy, C; Glaser, M

    2002-01-01

    %RD48 %title\\\\ \\\\Silicon detectors will be widely used in experiments at the CERN Large Hadron Collider where high radiation levels will cause significant bulk damage. In addition to increased leakage current and charge collection losses worsening the signal to noise, the induced radiation damage changes the effective doping concentration and represents the limiting factor to long term operation of silicon detectors. The objectives are to develop radiation hard silicon detectors that can operate beyond the limits of the present devices and that ensure guaranteed operation for the whole lifetime of the LHC experimental programme. Radiation induced defect modelling and experimental results show that the silicon radiation hardness depends on the atomic impurities present in the initial monocrystalline material.\\\\ \\\\ Float zone (FZ) silicon materials with addition of oxygen, carbon, nitrogen, germanium and tin were produced as well as epitaxial silicon materials with epilayers up to 200 $\\mu$m thickness. Their im...

  16. Clinical application of microcolumn gel technology in the diagnosis of neonatal immune hemolytic disease%微柱凝胶技术在新生儿同种免疫性溶血病诊断中的临床应用

    Institute of Scientific and Technical Information of China (English)

    李娟; 方代华; 许琴; 张铁英; 王若静

    2013-01-01

    目的 探讨微柱凝胶技术直接抗人球蛋白试验对同种免疫性溶血病的可行性及发病原因的分析.方法 采用微柱凝胶技术对1681例新生儿高胆红素血症患儿做直接抗人球蛋白试验.结果 本研究1681例新生儿高胆红素血症患儿微柱凝胶技术直接抗人球蛋白试验阳性497例,阳性率为29.6%;ABO血型系统所致的同种免疫性溶血病491例,占98.8% (491/497),Rh血型系统所致的同种免疫性溶血病6例,占1.2% (6/497).ABO血型系统中母亲O型,婴儿为A或B型476例,占96.9% (476/491),母/婴血型为A/B等其他配型15例,占3.1%(15/491).结论 直接抗人球蛋白试验与临床诊断符合率达90%以上,为新生儿溶血病提供实验室可靠诊断依据.%Objective To investigate the feasibility of microcolumn gel technology direct antiglobulin test in the autoimmune hemolytic disease,and to analyze the causes of autoimmune hemolytic disease.Methods One thousand six hundred and eighty-one cases of neonatal hyperbilirubinemia children taken the direct antiglobulin test by microcolumn gel technology.Results Among the 1681 cases of neonatal hyperbilirubinemi children,with microcolumn gel direct antiglobulin test positive in 497 cases,the positive rate was 29.6% ; with autoimmune hemolytic disease due to ABO blood group system 491 cases,accounting for 98.8% (491/497) ; six cases of autoimmune hemolytic disease due to Rh blood group system,accounting for 1.2% (6/497).O-ABO blood group system in the mother,the infant was type A or B of 476 cases,accounting for 96.9% (476/491) ; The mother/infant blood group A/B,matching a total of 15 cases,accounting for 3.1% (15/491).Conclusions The accordance rate of direct antiglobulin test and clinical diagnosis was 90% or more,and direct antiglobulin test can provide reliable laboratory diagnostic basis for hemolytic disease of newboms.

  17. Silicon processing for photovoltaics II

    CERN Document Server

    Khattak, CP

    2012-01-01

    The processing of semiconductor silicon for manufacturing low cost photovoltaic products has been a field of increasing activity over the past decade and a number of papers have been published in the technical literature. This volume presents comprehensive, in-depth reviews on some of the key technologies developed for processing silicon for photovoltaic applications. It is complementary to Volume 5 in this series and together they provide the only collection of reviews in silicon photovoltaics available.The volume contains papers on: the effect of introducing grain boundaries in silicon; the

  18. Laboratory course on silicon sensors

    CERN Document Server

    Crescio, E; Roe, S; Rudge, A

    2003-01-01

    The laboratory course consisted of four different mini sessions, in order to give the student some hands-on experience on various aspects of silicon sensors and related integrated electronics. The four experiments were. 1. Characterisation of silicon diodes for particle detection 2. Study of noise performance of the Viking readout circuit 3. Study of the position resolution of a silicon microstrip sensor 4. Study of charge transport in silicon with a fast amplifier The data in the following were obtained during the ICFA school by the students.

  19. Single crystalline mesoporous silicon nanowires

    Energy Technology Data Exchange (ETDEWEB)

    Hochbaum, Allon; Dargas, Daniel; Hwang, Yun Jeong; Yang, Peidong

    2009-08-18

    Herein we demonstrate a novel electroless etching synthesis of monolithic, single-crystalline, mesoporous silicon nanowire arrays with a high surface area and luminescent properties consistent with conventional porous silicon materials. The photoluminescence of these nanowires suggest they are composed of crystalline silicon with small enough dimensions such that these arrays may be useful as photocatalytic substrates or active components of nanoscale optoelectronic devices. A better understanding of this electroless route to mesoporous silicon could lead to facile and general syntheses of different narrow bandgap semiconductor nanostructures for various applications.

  20. Social Networks in Silicon Valley

    Institute of Scientific and Technical Information of China (English)

    Joseph Leu

    2006-01-01

    @@ Social network is a dominant, distinguishing characteristic of Silicon Valley. Because innovation entails coping with a high degree of uncertainty,such innovation is particularly dependent on networks.

  1. Large Brillouin Amplification in Silicon

    CERN Document Server

    Kittlaus, Eric A; Rakich, Peter T

    2015-01-01

    Strong Brillouin coupling has only recently been realized in silicon using a new class of optomechanical waveguides that yield both optical and phononic confinement. Despite these major advances, appreciable Brillouin amplification has yet to be observed in silicon. Using a new membrane-suspended silicon waveguide we report large Brillouin amplification for the first time, reaching levels greater than 5 dB for modest pump powers, and demonstrate a record low (5 mW) threshold for net amplification. This work represents a crucial advance necessary to realize high-performance Brillouin lasers and amplifiers in silicon.

  2. Solar silicon from directional solidification of MG silicon produced via the silicon carbide route

    Science.gov (United States)

    Rustioni, M.; Margadonna, D.; Pirazzi, R.; Pizzini, S.

    1986-01-01

    A process of metallurgical grade (MG) silicon production is presented which appears particularly suitable for photovoltaic (PV) applications. The MG silicon is prepared in a 240 KVA, three electrode submerged arc furnace, starting from high grade quartz and high purity silicon carbide. The silicon smelted from the arc furnace was shown to be sufficiently pure to be directionally solidified to 10 to 15 kg. After grinding and acid leaching, had a material yield larger than 90%. With a MG silicon feedstock containing 3 ppmw B, 290 ppmw Fe, 190 ppmw Ti, and 170 ppmw Al, blended with 50% of off grade electronic grade (EG) silicon to reconduct the boron content to a concentration acceptable for solar cell fabrication, the 99% of deep level impurities were concentrated in the last 5% of the ingot. Quite remarkably this material has OCV values higher tham 540 mV and no appreciable shorts due to SiC particles.

  3. 大展弦比机翼非线性颤振剪裁设计新方法%A NEW METHOD ON FLUTTER TAILORING TECHNIQUES OF HIGH-ASPECT-RATIO WINGS

    Institute of Scientific and Technical Information of China (English)

    任智毅; 金海波; 丁运亮

    2014-01-01

    A method was presented to analyze the nonlinear flutter.Based on this method,the flutter character-istics of the high aspect wing were illustrated.The numerical results show that the flutter speed is decreased when the first horizontal bending mode involved.Secondly,this study discussed how the main direction of the compos-ite influenced the character of the nonlinear vibration and flutter,and established the method of the flutter clip-ping to the high aspect wing.And the result shows that the stiffness of structure can be changed by changing the main direction of the composite.It mainly changes the horizontal bending mode,makes the main direction tend to the trailing edge,and then makes the section line move to the leading edge.Further analyzing the nonlinear flut-ter reveals that it is the changing of the horizontal bending mode that causes the flutter speed change obviously. And by the section line of this mode moves ahead,the flutter speed will become larger.In the study,two exam-ples were illustrated to validate its truthiness.%针对大展弦比机翼水平弯曲模态参与耦合颤振问题,首先用考虑几何非线性的颤振分析方法研究了某大展弦比机翼的颤振特性,结果表明水平一弯模态参与耦合降低了机翼传统模式的线性颤振速度;然后研究了复合材料的铺层主刚度方向角对机翼非线性振动特性和颤振特性的影响规律,提出了大展弦比机翼非线性颤振剪裁设计的新方法。结果表明主刚度方向角的变化主要引起了水平一弯模态振型的改变,一般表现为主刚度方向角从机翼后梁向后缘偏转,该阶模态的相对扭转振型节线位置向前缘移动;反之,该节线位置后移。进一步非线性颤振分析,发现水平一弯模态振型的变化引起了该阶模态参与耦合颤振速度的明显改变,主要表现为该颤振型的颤振速度随该阶模态的相对扭转振型节线位置前移量的增加而增大。通过两个算例验证了结论的正确性。

  4. Silicon on insulator with active buried regions

    Science.gov (United States)

    McCarthy, A.M.

    1996-01-30

    A method is disclosed for forming patterned buried components, such as collectors, sources and drains, in silicon-on-insulator (SOI) devices. The method is carried out by epitaxially growing a suitable sequence of single or multiple etch stop layers ending with a thin silicon layer on a silicon substrate, masking the silicon such that the desired pattern is exposed, introducing dopant and activating in the thin silicon layer to form doped regions. Then, bonding the silicon layer to an insulator substrate, and removing the silicon substrate. The method additionally involves forming electrical contact regions in the thin silicon layer for the buried collectors. 10 figs.

  5. New process of silicon carbide purification intended for silicon passivation

    Science.gov (United States)

    Barbouche, M.; Zaghouani, R. Benabderrahmane; Benammar, N. E.; Aglieri, V.; Mosca, M.; Macaluso, R.; Khirouni, K.; Ezzaouia, H.

    2017-01-01

    In this work, we report on a new, efficient and low cost process of silicon carbide (SiC) powder purification intended to be used in photovoltaic applications. This process consists on the preparation of porous silicon carbide layers followed by a photo-thermal annealing under oxygen atmosphere and chemical treatment. The effect of etching time on impurities removal efficiency was studied. Inductively coupled plasma atomic emission spectrometry (ICP-AES) results showed that the best result was achieved for an etching time of 10 min followed by gettering at 900 °C during 1 h. SiC purity is improved from 3N (99.9771%) to 4N (99.9946%). Silicon carbide thin films were deposited onto silicon substrates by pulsed laser deposition technique (PLD) using purified SiC powder as target. Significant improvement of the minority carrier lifetime was obtained encouraging the use of SiC as a passivation layer for silicon.

  6. Vinyl ether silicones

    Energy Technology Data Exchange (ETDEWEB)

    Herzig, C.; Dauth, J.; Deubzer, B.; Weis, J. [Wacker-Chemie GmbH, Burghausen (Germany)

    1995-12-01

    Siloxanes with vinyl ether groups are prepared by hydrosilylation reaction of dihydrosiloxanes with divinyl ethers in excess. Different stoichiometry, produces linear copolymers of different viscosities and double bond concentrations always with an active vinyl ether group at each chain end. Polymerisations triggered by UV light were done with mixtures of these compounds and a series of onium salts. Very fast cure is observed even with low doses at 290 nm. V.E. silicones are found to cure essentially quantitative. The comparison with other highly reactive cationic monomers revealed that compounds are among the fastest curing prepolymers in cationic chemistry.

  7. Silicon production process evaluations

    Science.gov (United States)

    1982-01-01

    Chemical engineering analyses involving the preliminary process design of a plant (1,000 metric tons/year capacity) to produce silicon via the technology under consideration were accomplished. Major activities in the chemical engineering analyses included base case conditions, reaction chemistry, process flowsheet, material balance, energy balance, property data, equipment design, major equipment list, production labor and forward for economic analysis. The process design package provided detailed data for raw materials, utilities, major process equipment and production labor requirements necessary for polysilicon production in each process.

  8. Edgeless silicon pad detectors

    Science.gov (United States)

    Perea Solano, B.; Abreu, M. C.; Avati, V.; Boccali, T.; Boccone, V.; Bozzo, M.; Capra, R.; Casagrande, L.; Chen, W.; Eggert, K.; Heijne, E.; Klauke, S.; Li, Z.; Mäki, T.; Mirabito, L.; Morelli, A.; Niinikoski, T. O.; Oljemark, F.; Palmieri, V. G.; Rato Mendes, P.; Rodrigues, S.; Siegrist, P.; Silvestris, L.; Sousa, P.; Tapprogge, S.; Trocmé, B.

    2006-05-01

    We report measurements in a high-energy pion beam of the sensitivity of the edge region in "edgeless" planar silicon pad diode detectors diced through their contact implants. A large surface current on such an edge prevents the normal reverse biasing of the device, but the current can be sufficiently reduced by the use of a suitable cutting method, followed by edge treatment, and by operating the detector at low temperature. The depth of the dead layer at the diced edge is measured to be (12.5±8 stat..±6 syst.) μm.

  9. Edgeless silicon pad detectors

    Energy Technology Data Exchange (ETDEWEB)

    Perea Solano, B. [CERN, CH-1211 Geneva 23 (Switzerland)]. E-mail: blanca.perea.solano@cern.ch; Abreu, M.C. [LIP and University of Algarve, 8000 Faro (Portugal); Avati, V. [CERN, CH-1211 Geneva 23 (Switzerland); Boccali, T. [INFN Sez. di Pisa and Scuola Normale Superiore, Pisa (Italy); Boccone, V. [INFN Sez. di Genova and Universita di Genova, Genoa (Italy); Bozzo, M. [INFN Sez. di Genova and Universita di Genova, Genoa (Italy); Capra, R. [INFN Sez. di Genova and Universita di Genova, Genoa (Italy); Casagrande, L. [INFN Sez. di Roma 2 and Universita di Roma 2, Rome (Italy); Chen, W. [Brookhaven National Laboratory, Upton, NY 11973-5000 (United States); Eggert, K. [CERN, CH-1211 Geneva 23 (Switzerland); Heijne, E. [CERN, CH-1211 Geneva 23 (Switzerland); Klauke, S. [CERN, CH-1211 Geneva 23 (Switzerland); Li, Z. [Brookhaven National Laboratory, Upton, NY 11973-5000 (United States); Maeki, T. [Helsinki Institute of Physics, Helsinki (Finland); Mirabito, L. [CERN, CH-1211 Geneva 23 (Switzerland); Morelli, A. [INFN Sez. di Genova and Universita di Genova, Genoa (Italy); Niinikoski, T.O. [CERN, CH-1211 Geneva 23 (Switzerland); Oljemark, F. [Helsinki Institute of Physics, Helsinki (Finland); Palmieri, V.G. [Helsinki Institute of Physics, Helsinki (Finland); Rato Mendes, P. [LIP and University of Algarve, 8000 Faro (Portugal); Rodrigues, S. [LIP and University of Algarve, 8000 Faro (Portugal); Siegrist, P. [CERN, CH-1211 Geneva 23 (Switzerland); Silvestris, L. [INFN Sez. Di Bari, Bari (Italy); Sousa, P. [LIP and University of Algarve, 8000 Faro (Portugal); Tapprogge, S. [Helsinki Institute of Physics, Helsinki (Finland); Trocme, B. [Institut de Physique Nucleaire, Villeurbanne (France)

    2006-05-01

    We report measurements in a high-energy pion beam of the sensitivity of the edge region in 'edgeless' planar silicon pad diode detectors diced through their contact implants. A large surface current on such an edge prevents the normal reverse biasing of the device, but the current can be sufficiently reduced by the use of a suitable cutting method, followed by edge treatment, and by operating the detector at low temperature. The depth of the dead layer at the diced edge is measured to be (12.5{+-}8{sub stat.}.{+-}6{sub syst.}) {mu}m.

  10. The LHCb Silicon Tracker

    CERN Document Server

    Elsasser, Ch; Gallas Torreira, A; Pérez Trigo, A; Rodríguez Pérez, P; Bay, A; Blanc, F; Dupertuis, F; Haefeli, G; Komarov, I; Märki, R; Muster, B; Nakada, T; Schneider, O; Tobin, M; Tran, M T; Anderson, J; Bursche, A; Chiapolini, N; Saornil, S; Steiner, S; Steinkamp, O; Straumann, U; Vollhardt, A; Britsch, M; Schmelling, M; Voss, H; Okhrimenko, O; Pugatch, V

    2013-01-01

    The aim of the LHCb experiment is to study rare heavy quark decays and CP vio- lation with the high rate of beauty and charmed hadrons produced in $pp$ collisions at the LHC. The detector is designed as a single-arm forward spectrometer with excellent tracking and particle identification performance. The Silicon Tracker is a key part of the tracking system to measure the particle trajectories to high precision. This paper reports the performance as well as the results of the radiation damage monitoring based on leakage currents and on charge collection efficiency scans during the data taking in the LHC Run I.

  11. Light Emitting Porous Silicon

    Science.gov (United States)

    1993-05-01

    ml - mm m lm m ~ m m ThO report Page 14 preparation method which has been originally described by Wohler [23] leads to a bright yellow substance with...Solid State Commun. 81, 307 (1992). [221 H. Kautsky, and H. Zocher, Z. Phys. 9,267 (1992). L TNO report Page 28 [231 F. Wohler , Lieb. Ann. 127, 275 (1863...Netherlands Fax + 31 70 328 09 61 Phone + 31 70 326 42 21 TNO- report copy no. e FEL-93eo047r Lh Emitting Porous Silicon sitho(s): DTICHMi.P.Th

  12. Silicon carbide sewing thread

    Science.gov (United States)

    Sawko, Paul M. (Inventor)

    1995-01-01

    Composite flexible multilayer insulation systems (MLI) were evaluated for thermal performance and compared with currently used fibrous silica (baseline) insulation system. The systems described are multilayer insulations consisting of alternating layers of metal foil and scrim ceramic cloth or vacuum metallized polymeric films quilted together using ceramic thread. A silicon carbide thread for use in the quilting and the method of making it are also described. These systems provide lightweight thermal insulation for a variety of uses, particularly on the surface of aerospace vehicles subject to very high temperatures during flight.

  13. Silicon Valley Lifestyle

    Institute of Scientific and Technical Information of China (English)

    Joseph Leu

    2005-01-01

    @@ As we embrace the rapid developments of the new media age,competitiveness in the field of internet and computer technology is an increasingly crucial factor in stimulating new business,jobs and new industry in the region.Accelerating advancements in new media,internet,software and computer technologies offer new commercial opportunities and sources of economic revenue. Silicon Valley has been a model of the new age since its existence.While the dream place not only has a unique business model,but also has a very special lifestyle.

  14. Impurity doping processes in silicon

    CERN Document Server

    Wang, FFY

    1981-01-01

    This book introduces to non-experts several important processes of impurity doping in silicon and goes on to discuss the methods of determination of the concentration of dopants in silicon. The conventional method used is the discussion process, but, since it has been sufficiently covered in many texts, this work describes the double-diffusion method.

  15. Hydrodynamic slip in silicon nanochannels

    Science.gov (United States)

    Ramos-Alvarado, Bladimir; Kumar, Satish; Peterson, G. P.

    2016-03-01

    Equilibrium and nonequilibrium molecular dynamics simulations were performed to better understand the hydrodynamic behavior of water flowing through silicon nanochannels. The water-silicon interaction potential was calibrated by means of size-independent molecular dynamics simulations of silicon wettability. The wettability of silicon was found to be dependent on the strength of the water-silicon interaction and the structure of the underlying surface. As a result, the anisotropy was found to be an important factor in the wettability of these types of crystalline solids. Using this premise as a fundamental starting point, the hydrodynamic slip in nanoconfined water was characterized using both equilibrium and nonequilibrium calculations of the slip length under low shear rate operating conditions. As was the case for the wettability analysis, the hydrodynamic slip was found to be dependent on the wetted solid surface atomic structure. Additionally, the interfacial water liquid structure was the most significant parameter to describe the hydrodynamic boundary condition. The calibration of the water-silicon interaction potential performed by matching the experimental contact angle of silicon led to the verification of the no-slip condition, experimentally reported for silicon nanochannels at low shear rates.

  16. Silicon-micromachined microchannel plates

    CERN Document Server

    Beetz, C P; Steinbeck, J; Lemieux, B; Winn, D R

    2000-01-01

    Microchannel plates (MCP) fabricated from standard silicon wafer substrates using a novel silicon micromachining process, together with standard silicon photolithographic process steps, are described. The resulting SiMCP microchannels have dimensions of approx 0.5 to approx 25 mu m, with aspect ratios up to 300, and have the dimensional precision and absence of interstitial defects characteristic of photolithographic processing, compatible with positional matching to silicon electronics readouts. The open channel areal fraction and detection efficiency may exceed 90% on plates up to 300 mm in diameter. The resulting silicon substrates can be converted entirely to amorphous quartz (qMCP). The strip resistance and secondary emission are developed by controlled depositions of thin films, at temperatures up to 1200 deg. C, also compatible with high-temperature brazing, and can be essentially hydrogen, water and radionuclide-free. Novel secondary emitters and cesiated photocathodes can be high-temperature deposite...

  17. Growth of silicon sheets from metallurgical-grade silicon

    Science.gov (United States)

    Ciszek, T.; Schietzelt, M.; Kazmerski, L. L.; Hurd, J. L.; Fernelius, B.

    1981-05-01

    Impure silicon is difficult to solidify in sheet form because of morphological proturberances which may result from constitutional supercooling. Sheet growth methods which require a specific crystallographic orientation or which are characterized by a narrow melt meniscus are most affected by this problem. The edge-supported pulling technique was applied to sheet growth of metallurgical grade silicon and DAR (Direct Arc Reactor) silicon. The 7 mm meniscus height associated with this technique allowed the growth of 5 cm wide sheets from both materials. In each case, the sheets were p-type.

  18. Lipid membranes on nanostructured silicon.

    Energy Technology Data Exchange (ETDEWEB)

    Slade, Andrea Lynn; Lopez, Gabriel P. (University of New Mexico, Albuquerque, NM); Ista, Linnea K. (University of New Mexico, Albuquerque, NM); O' Brien, Michael J. (University of New Mexico, Albuquerque, NM); Sasaki, Darryl Yoshio; Bisong, Paul (University of New Mexico, Albuquerque, NM); Zeineldin, Reema R. (University of New Mexico, Albuquerque, NM); Last, Julie A.; Brueck, Stephen R. J. (University of New Mexico, Albuquerque, NM)

    2004-12-01

    A unique composite nanoscale architecture that combines the self-organization and molecular dynamics of lipid membranes with a corrugated nanotextured silicon wafer was prepared and characterized with fluorescence microscopy and scanning probe microscopy. The goal of this project was to understand how such structures can be assembled for supported membrane research and how the interfacial interactions between the solid substrate and the soft, self-assembled material create unique physical and mechanical behavior through the confinement of phases in the membrane. The nanometer scale structure of the silicon wafer was produced through interference lithography followed by anisotropic wet etching. For the present study, a line pattern with 100 nm line widths, 200 nm depth and a pitch of 360 nm pitch was fabricated. Lipid membranes were successfully adsorbed on the structured silicon surface via membrane fusion techniques. The surface topology of the bilayer-Si structure was imaged using in situ tapping mode atomic force microscopy (AFM). The membrane was observed to drape over the silicon structure producing an undulated topology with amplitude of 40 nm that matched the 360 nm pitch of the silicon structure. Fluorescence recovery after photobleaching (FRAP) experiments found that on the microscale those same structures exhibit anisotropic lipid mobility that was coincident with the silicon substructure. The results showed that while the lipid membrane maintains much of its self-assembled structure in the composite architecture, the silicon substructure indeed influences the dynamics of the molecular motion within the membrane.

  19. Single crystalline mesoporous silicon nanowires

    Energy Technology Data Exchange (ETDEWEB)

    Hochbaum, A.I.; Gargas, Daniel; Jeong Hwang, Yun; Yang, Peidong

    2009-08-04

    Herein we demonstrate a novel electroless etching synthesis of monolithic, single-crystalline, mesoporous silicon nanowire arrays with a high surface area and luminescent properties consistent with conventional porous silicon materials. These porous nanowires also retain the crystallographic orientation of the wafer from which they are etched. Electron microscopy and diffraction confirm their single-crystallinity and reveal the silicon surrounding the pores is as thin as several nanometers. Confocal fluorescence microscopy showed that the photoluminescence (PL) of these arrays emanate from the nanowires themselves, and their PL spectrum suggests that these arrays may be useful as photocatalytic substrates or active components of nanoscale optoelectronic devices.

  20. Ideal anodization of silicon

    Energy Technology Data Exchange (ETDEWEB)

    Yamani, Z.; Thompson, W.H.; AbuHassan, L.; Nayfeh, M.H. [Department of Physics, University of Illinois at Urbana-Champaign, 1110 W. Green Street, Urbana, Illinois 61801 (United States)

    1997-06-01

    Silicon has been anodized such that the porous layer is passivated with a homogeneous stretching phase by incorporating H{sub 2}O{sub 2} in the anodization mixture. Fourier transform infrared spectroscopy measurements show that the Si{endash}H stretching mode oriented perpendicular to the surface at {approximately}2100cm{sup {minus}1} dominates the spectrum with negligible contribution from the bending modes in the 600{endash}900cm{sup {minus}1} region. Material analysis using Auger electron spectroscopy shows that the samples have very little impurities, and that the luminescent layer is very thin (5{endash}10 nm). Scanning electron microscopy shows that the surface is smoother with features smaller than those of conventional samples. {copyright} {ital 1997 American Institute of Physics.}

  1. Silicon force sensor

    Science.gov (United States)

    Galambos, Paul C.; Crenshaw, Thomas B.; Nishida, Erik E.; Burnett, Damon J.; Lantz, Jeffrey W.

    2016-07-05

    The various technologies presented herein relate to a sensor for measurement of high forces and/or high load shock rate(s), whereby the sensor utilizes silicon as the sensing element. A plate of Si can have a thinned region formed therein on which can be formed a number of traces operating as a Wheatstone bridge. The brittle Si can be incorporated into a layered structure comprising ductile and/or compliant materials. The sensor can have a washer-like configuration which can be incorporated into a nut and bolt configuration, whereby tightening of the nut and bolt can facilitate application of a compressive preload upon the sensor. Upon application of an impact load on the bolt, the compressive load on the sensor can be reduced (e.g., moves towards zero-load), however the magnitude of the preload can be such that the load on the sensor does not translate to tensile stress being applied to the sensor.

  2. Monolithic silicon bolometers

    Science.gov (United States)

    Downey, P. M.; Jeffries, A. D.; Meyer, S. S.; Weiss, R.; Bachner, F. J.; Donnelly, J. P.; Lindley, W. T.; Mountain, R. W.; Silversmith, D. J.

    1984-01-01

    A new type of bolometer detector for the millimeter and submillimeter spectral range is described. The bolometer is constructed of silicon using integrated circuit fabrication techniques. Ion implantation is used to give controlled resistance vs temperature properties as well as extremely low 1/f noise contacts. The devices have been tested between 4.2 and 0.3 K. The best electrical NEP measured is 4 x 10 to the -16th W/Hz to the 1/2 at 0.35 K between 1- and 10-Hz modulation frequency. This device had a detecting area of 0.25 sq cm and a time constant of 20 msec at a bath temperature of 0.35 K.

  3. Automated silicon module assembly for the CMS silicon tracker

    CERN Document Server

    Surrow, B

    2001-01-01

    The CMS silicon tracker requires the assembly of about 20000 individual silicon detector modules. To ensure the assembly of such an amount with high, reproducible quality, an automated procedure has been developed for module assembly based on a high-precision robotic positioning machine. This procedure allows a much higher throughput and will result in much reduced manpower requirements than for traditional manual techniques. (1 refs).

  4. Integrated silicon and silicon nitride photonic circuits on flexible substrates.

    Science.gov (United States)

    Chen, Yu; Li, Mo

    2014-06-15

    Flexible integrated photonic devices based on crystalline materials on plastic substrates have a promising potential in many unconventional applications. In this Letter, we demonstrate a fully integrated photonic system including ring resonators and grating couplers, based on both crystalline silicon and silicon nitride, on flexible plastic substrate by using the stamping-transfer method. A high yield has been achieved by a simple, yet reliable transfer method without significant performance degradation.

  5. Acute pneumonitis secondary to subcutaneous silicone injection

    Directory of Open Access Journals (Sweden)

    Gopie P

    2011-06-01

    Full Text Available Priya Gopie, Sateesh Sakhamuri, Anu Sharma, Sanjeev Solomon, Surujpal TeelucksinghClinical Medical Sciences, University of the West Indies, St Augustine, TrinidadAbstract: Following silicone injection, end organ toxicity can occur. To our knowledge this report documents the first case of silicone embolization in the Caribbean and serves to highlight an emergent danger associated with its illicit use for cosmetic purposes in this region.Keywords: silicone, silicone embolism, silicone pneumonitis, alveolar hemorrhage, pneumonitis

  6. Silicon Holder For Molecular-Beam Epitaxy

    Science.gov (United States)

    Hoenk, Michael E.; Grunthaner, Paula J.; Grunthaner, Frank J.

    1993-01-01

    Simple assembly of silicon wafers holds silicon-based charge-coupled device (CCD) during postprocessing in which silicon deposited by molecular-beam epitaxy. Attains temperatures similar to CCD, so hotspots suppressed. Coefficients of thermal expansion of holder and CCD equal, so thermal stresses caused by differential thermal expansion and contraction do not develop. Holder readily fabricated, by standard silicon processing techniques, to accommodate various CCD geometries. Silicon does not contaminate CCD or molecular-beam-epitaxy vacuum chamber.

  7. Studies of silicon carbide and silicon carbide nitride thin films

    Science.gov (United States)

    Alizadeh, Zhila

    Silicon carbide semiconductor technology is continuing to advance rapidly. The excellent physical and electronic properties of silicon carbide recently take itself to be the main focused power device material for high temperature, high power, and high frequency electronic devices because of its large band gap, high thermal conductivity, and high electron saturation drift velocity. SiC is more stable than Si because of its high melting point and mechanical strength. Also the understanding of the structure and properties of semiconducting thin film alloys is one of the fundamental steps toward their successful application in technologies requiring materials with tunable energy gaps, such as solar cells, flat panel displays, optical memories and anti-reflecting coatings. Silicon carbide and silicon nitrides are promising materials for novel semiconductor applications because of their band gaps. In addition, they are "hard" materials in the sense of having high elastic constants and large cohesive energies and are generally resistant to harsh environment, including radiation. In this research, thin films of silicon carbide and silicon carbide nitride were deposited in a r.f magnetron sputtering system using a SiC target. A detailed analysis of the surface chemistry of the deposited films was performed using x-ray photoelectron spectroscopy (XPS), Fourier Transform Infrared Spectroscopy (FTIR) and Raman spectroscopy whereas structure and morphology was studied atomic force microscopy (AFM), and nonoindentation.

  8. Characterization of silicon-silicon carbide ceramic derived from carbon-carbon silicon carbide composites

    Energy Technology Data Exchange (ETDEWEB)

    Srivastava, Vijay K. [Indian Institute of Technology, Varanasi (India). Dept. of Mechanical Engineering; Krenkel, Walter [Univ. of Bayreuth (Germany). Dept. of Ceramic Materials Engineering

    2013-04-15

    The main objective of the present work is to process porous silicon - silicon carbide (Si - SiC) ceramic by the oxidation of carboncarbon silicon carbide (C/C - SiC) composites. Phase studies are performed on the oxidized porous composite to examine the changes due to the high temperature oxidation. Further, various characterization techniques are performed on Si- SiC ceramics in order to study the material's microstructure. The effects of various parameters such as fiber alignment (twill weave and short/chopped fiber) and phenolic resin type (resol and novolak) are characterized.

  9. Imprinted silicon-based nanophotonics

    DEFF Research Database (Denmark)

    Borel, Peter Ingo; Olsen, Brian Bilenberg; Frandsen, Lars Hagedorn

    2007-01-01

    We demonstrate and optically characterize silicon-on-insulator based nanophotonic devices fabricated by nanoimprint lithography. In our demonstration, we have realized ordinary and topology-optimized photonic crystal waveguide structures. The topology-optimized structures require lateral pattern ...

  10. Scattering characteristics from porous silicon

    Directory of Open Access Journals (Sweden)

    R. Sabet-Dariani

    2000-12-01

    Full Text Available   Porous silicon (PS layers come into existance as a result of electrochemical anodization on silicon. Although a great deal of research has been done on the formation and optical properties of this material, the exact mechanism involved is not well-understood yet.   In this article, first, the optical properties of silicon and porous silicon are described. Then, previous research and the proposed models about reflection from PS and the origin of its photoluminescence are reveiwed. The reflecting and scattering, absorption and transmission of light from this material, are then investigated. These experiments include,different methods of PS sample preparation their photoluminescence, reflecting and scattering of light determining different characteristics with respect to Si bulk.

  11. The History of Silicon Valley

    Institute of Scientific and Technical Information of China (English)

    Joseph Leu

    2005-01-01

    @@ Just as Manchester was once the center for indus trial progress, the microelectronics industry also has a heartland. Silicon Valley is located in a thirty by ten miles strip between San Francisco and San Jose,California.

  12. Optical information capacity of silicon

    CERN Document Server

    Dimitropoulos, Dimitris

    2014-01-01

    Modern computing and data storage systems increasingly rely on parallel architectures where processing and storage load is distributed within a cluster of nodes. The necessity for high-bandwidth data links has made optical communication a critical constituent of modern information systems and silicon the leading platform for creating the necessary optical components. While silicon is arguably the most extensively studied material in history, one of its most important attributes, an analysis of its capacity to carry optical information, has not been reported. The calculation of the information capacity of silicon is complicated by nonlinear losses, phenomena that emerge in optical nanowires as a result of the concentration of optical power in a small geometry. Nonlinear losses are absent in silica glass optical fiber and other common communication channels. While nonlinear loss in silicon is well known, noise and fluctuations that arise from it have never been considered. Here we report sources of fluctuations...

  13. Ultra-fast silicon detectors

    Energy Technology Data Exchange (ETDEWEB)

    Sadrozinski, H. F.-W., E-mail: hartmut@scipp.ucsc.edu [Santa Cruz Institute for Particle Physics, UC Santa Cruz, Santa Cruz, CA 95064 (United States); Ely, S.; Fadeyev, V.; Galloway, Z.; Ngo, J.; Parker, C.; Petersen, B.; Seiden, A.; Zatserklyaniy, A. [Santa Cruz Institute for Particle Physics, UC Santa Cruz, Santa Cruz, CA 95064 (United States); Cartiglia, N.; Marchetto, F. [INFN Torino, Torino (Italy); Bruzzi, M.; Mori, R.; Scaringella, M.; Vinattieri, A. [University of Florence, Department of Physics and Astronomy, Sesto Fiorentino, Firenze (Italy)

    2013-12-01

    We propose to develop a fast, thin silicon sensor with gain capable to concurrently measure with high precision the space (∼10 μm) and time (∼10 ps) coordinates of a particle. This will open up new application of silicon detector systems in many fields. Our analysis of detector properties indicates that it is possible to improve the timing characteristics of silicon-based tracking sensors, which already have sufficient position resolution, to achieve four-dimensional high-precision measurements. The basic sensor characteristics and the expected performance are listed, the wide field of applications are mentioned and the required R and D topics are discussed. -- Highlights: •We are proposing thin pixel silicon sensors with 10's of picoseconds time resolution. •Fast charge collection is coupled with internal charge multiplication. •The truly 4-D sensors will revolutionize imaging and particle counting in many applications.

  14. Silicon Drift Detectors for ALICE

    CERN Document Server

    Navach, F; CERN. Geneva

    1992-01-01

    The Silicon Drift Detector (SDD) is a semiconductor, not yet extensively used in HEP experiment, which has an excellent spatial resolution and granularity about comparable to a pixel device requiring a number of readout channels two order of magnitude less.

  15. Social Networks in Silicon Valley

    Institute of Scientific and Technical Information of China (English)

    Joseph; Leu

    2006-01-01

      Social network is a dominant, distinguishing characteristic of Silicon Valley. Because innovation entails coping with a high degree of uncertainty,such innovation is particularly dependent on networks.……

  16. Evanescent field phase shifting in a silicon nitride waveguide using a coupled silicon slab

    DEFF Research Database (Denmark)

    Jensen, Asger Sellerup; Oxenløwe, Leif Katsuo; Green, William M. J.

    2015-01-01

    An approach for electrical modulation of low-loss silicon nitride waveguides is proposed, using a silicon nitride waveguide evanescently loaded with a thin silicon slab. The thermooptic phase-shift characteristics are investigated in a racetrack resonator configuration.......An approach for electrical modulation of low-loss silicon nitride waveguides is proposed, using a silicon nitride waveguide evanescently loaded with a thin silicon slab. The thermooptic phase-shift characteristics are investigated in a racetrack resonator configuration....

  17. Silicone-Rubber Stitching Seal

    Science.gov (United States)

    Wang, D. S.

    1985-01-01

    Fabric products protected from raveling by coating threads and filling stitching holes with silicone rubber. Uncored silicone rubber applied to stitching lines with air-pressurized sealant gun. Next, plastic release film placed on coated side, and blanket flipped over so release film lies underneath. Blanket then bagged and adhesive cured under partial vacuum of about 3.5 psi or under pressure. Applications include balloons, parachutes, ultralight aircraft, sails, rescue harnesses, tents, or other fabric products highly stressed in use.

  18. Silicon superconducting quantum interference device

    Energy Technology Data Exchange (ETDEWEB)

    Duvauchelle, J. E.; Francheteau, A.; Marcenat, C.; Lefloch, F., E-mail: francois.lefloch@cea.fr [Université Grenoble Alpes, CEA - INAC - SPSMS, F-38000 Grenoble (France); Chiodi, F.; Débarre, D. [Université Paris-sud, CNRS - IEF, F-91405 Orsay - France (France); Hasselbach, K. [Université Grenoble Alpes, CNRS - Inst. Néel, F-38000 Grenoble (France); Kirtley, J. R. [Center for probing at nanoscale, Stanford University, Palo Alto, California 94305-4045 (United States)

    2015-08-17

    We have studied a Superconducting Quantum Interference Device (SQUID) made from a single layer thin film of superconducting silicon. The superconducting layer is obtained by heavily doping a silicon wafer with boron atoms using the gas immersion laser doping technique. The SQUID is composed of two nano-bridges (Dayem bridges) in a loop and shows magnetic flux modulation at low temperature and low magnetic field. The overall behavior shows very good agreement with numerical simulations based on the Ginzburg-Landau equations.

  19. Silicon Sensors for HEP Experiments

    CERN Document Server

    Dierlamm, Alexander Hermann

    2017-01-01

    With increasing luminosity of accelerators for experiments in High Energy Physics the demands on the detectors increase as well. Especially tracking and vertexing detectors made of silicon sensors close to the interaction point need to be equipped with more radiation hard devices. This article introduces the different types of silicon sensors, describes measures to increase radiation hardness and provides an overview of present upgrade choices of HEP experiments.

  20. Deposited low temperature silicon GHz modulator

    CERN Document Server

    Lee, Yoon Ho Daniel; Lipson, Michal

    2013-01-01

    The majority of silicon photonics is built on silicon-on-insulator (SOI) wafers while the majority of electronics, including CPUs and memory, are built on bulk silicon wafers, limiting broader acceptance of silicon photonics. This discrepancy is a result of silicon photonics's requirement for a single-crystalline silicon (c-Si) layer and a thick undercladding for optical guiding that bulk silicon wafers to not provide. While the undercladding problem can be partially addressed by substrate removal techniques, the complexity of co-integrating photonics with state-of-the-art transistors and real estate competition between electronics and photonics remain problematic. We show here a platform for deposited GHz silicon photonics based on polycrystalline silicon with high optical quality suitable for high performance electro-optic devices. We demonstrate 3 Gbps polysilicon electro-optic modulator fabricated on a deposited polysilicon layer fully compatible with CMOS backend integration. These results open up an arr...

  1. Direct Production of Silicones From Sand

    Energy Technology Data Exchange (ETDEWEB)

    Larry N. Lewis; F.J. Schattenmann: J.P. Lemmon

    2001-09-30

    Silicon, in the form of silica and silicates, is the second most abundant element in the earth's crust. However the synthesis of silicones (scheme 1) and almost all organosilicon chemistry is only accessible through elemental silicon. Silicon dioxide (sand or quartz) is converted to chemical-grade elemental silicon in an energy intensive reduction process, a result of the exceptional thermodynamic stability of silica. Then, the silicon is reacted with methyl chloride to give a mixture of methylchlorosilanes catalyzed by cooper containing a variety of tract metals such as tin, zinc etc. The so-called direct process was first discovered at GE in 1940. The methylchlorosilanes are distilled to purify and separate the major reaction components, the most important of which is dimethyldichlorosilane. Polymerization of dimethyldichlorosilane by controlled hydrolysis results in the formation of silicone polymers. Worldwide, the silicones industry produces about 1.3 billion pounds of the basic silicon polymer, polydimethylsiloxane.

  2. Silicon active photonic devices

    Science.gov (United States)

    Dimitropoulos, Dimitrios

    Active photonic devices utilizing the optical nonlinearities of silicon have emerged in the last 5 years and the effort for commercial photonic devices in the material that has been the workhorse of electronics has been building up since. This dissertation presents the theory for some of these devices. We are concerned herein with CW lasers, amplifiers and wavelength converters that are based on the Raman effect. There have already been cursory experimental demonstrations of these devices and some of their limitations are already apparent. Most of the limitations observed are because of the appearance of effects that are competing with stimulated Raman scattering. Under the high optical powers that are necessary for the Raman effect (tens to hundrends of mW's) the process of optical two-photon (TPA) absorption occurs. The absorption of optical power that it causes itself is weak but in the process electrons and holes are generated which can further absorb light through the free-carrier absorption effect (FCA). The effective "lifetime" that these carriers have determines the magnitude of the FCA loss. We present a model for the carrier lifetime in Silicon-On-Insulator (SOI) waveguides and numerical simulations to understand how this critical parameter varies and how it can be controlled. A p-i-n junction built along SOI waveguides can help achieve lifetime of the order of 20--100 ps but the price one has to pay is on-chip electrical power consumption on the order of 100's of mWs. We model CW Raman lasers and we find that the carrier lifetime reduces the output power. If the carrier lifetime exceeds a certain "critical" value optical losses become overwhelming and lasing is impossible. As we show, in amplifiers, the nonlinear loss does not only result in diminished gain, but also in a higher noise figure. Finally the effect of Coherent anti-Stokes Raman scattering (CARS) is examined. The effect is important because with a pump frequency at 1434nm coherent power

  3. Silicon Tetrafluoride on Io

    CERN Document Server

    Schaefer, L; Schaefer, Laura

    2005-01-01

    Silicon tetrafluoride (SiF4) is observed in terrestrial volcanic gases and is predicted to be the major F - bearing species in low temperature volcanic gases on Io (Schaefer and Fegley, 2005b). SiF4 gas is also a potential indicator of silica-rich crust on Io. We used F/S ratios in terrestrial and extraterrestrial basalts, and gas/lava enrichment factors for F and S measured at terrestrial volcanoes to calculate equilibrium SiF4/SO2 ratios in volcanic gases on Io. We conclude that SiF4 can be produced at levels comparable to the observed NaCl/SO2 gas ratio. We also considered potential loss processes for SiF4 in volcanic plumes and in Io's atmosphere including ion-molecule reactions, electron chemistry, photochemistry, reactions with the major atmospheric constituents, and condensation. Photochemical destruction (tchem ~ 266 days) and/or condensation as Na2SiF6 (s) appear to be the major sinks for SiF4. We recommend searching for SiF4 with infrared spectroscopy using its 9.7 micron band as done on Earth.

  4. Collimation: a silicon solution

    CERN Multimedia

    2007-01-01

    Silicon crystals could be used very efficiently to deflect high-energy beams. Testing at CERN has produced conclusive results, which could pave the way for a new generation of collimators. The set of five crystals used to test the reflection of the beams. The crystals are 0.75 mm wide and their alignment is adjusted with extreme precision. This figure shows the deflection of a beam by channelling and by reflection in the block of five crystals. Depending on the orientation of the crystals: 1) The beam passes without "seeing" the crystals and is not deflected 2) The beam is deflected by channelling (with an angle of around 100 μrad) 3) The beam is reflected (with an angle of around 50 μrad). The intensity of the deflected beam is illustrated by the intensity of the spot. The spot of the reflected beam is clearly more intense than that one of the channelled beam, demonstrating the efficiency of t...

  5. Nanoporous silicon oxide memory.

    Science.gov (United States)

    Wang, Gunuk; Yang, Yang; Lee, Jae-Hwang; Abramova, Vera; Fei, Huilong; Ruan, Gedeng; Thomas, Edwin L; Tour, James M

    2014-08-13

    Oxide-based two-terminal resistive random access memory (RRAM) is considered one of the most promising candidates for next-generation nonvolatile memory. We introduce here a new RRAM memory structure employing a nanoporous (NP) silicon oxide (SiOx) material which enables unipolar switching through its internal vertical nanogap. Through the control of the stochastic filament formation at low voltage, the NP SiOx memory exhibited an extremely low electroforming voltage (∼ 1.6 V) and outstanding performance metrics. These include multibit storage ability (up to 9-bits), a high ON-OFF ratio (up to 10(7) A), a long high-temperature lifetime (≥ 10(4) s at 100 °C), excellent cycling endurance (≥ 10(5)), sub-50 ns switching speeds, and low power consumption (∼ 6 × 10(-5) W/bit). Also provided is the room temperature processability for versatile fabrication without any compliance current being needed during electroforming or switching operations. Taken together, these metrics in NP SiOx RRAM provide a route toward easily accessed nonvolatile memory applications.

  6. Ultrafast Terahertz Conductivity of Photoexcited Nanocrystalline Silicon

    DEFF Research Database (Denmark)

    Cooke, David; MacDonald, A. Nicole; Hryciw, Aaron;

    2007-01-01

    The ultrafast transient ac conductivity of nanocrystalline silicon films is investigated using time-resolved terahertz spectroscopy. While epitaxial silicon on sapphire exhibits a free carrier Drude response, silicon nanocrystals embedded in glass show a response that is best described by a class......The ultrafast transient ac conductivity of nanocrystalline silicon films is investigated using time-resolved terahertz spectroscopy. While epitaxial silicon on sapphire exhibits a free carrier Drude response, silicon nanocrystals embedded in glass show a response that is best described...

  7. Next generation structural silicone glazing

    Directory of Open Access Journals (Sweden)

    Charles D. Clift

    2015-06-01

    Full Text Available This paper presents an advanced engineering evaluation, using nonlinear analysis of hyper elastic material that provides significant improvement to structural silicone glazing (SSG design in high performance curtain wall systems. Very high cladding wind pressures required in hurricane zones often result in bulky SSG profile dimensions. Architectural desire for aesthetically slender curtain wall framing sight-lines in combination with a desire to reduce aluminium usage led to optimization of silicone material geometry for better stress distribution.To accomplish accurate simulation of predicted behaviour under structural load, robust stress-strain curves of the silicone material are essential. The silicone manufacturer provided physical property testing via a specialized laboratory protocol. A series of rigorous curve fit techniques were then made to closely model test data in the finite element computer analysis that accounts for nonlinear strain of hyper elastic silicone.Comparison of this advanced design technique to traditional SSG design highlights differences in stress distribution contours in the silicone material. Simplified structural engineering per the traditional SSG design method does not provide accurate forecasting of material and stress optimization as shown in the advanced design.Full-scale specimens subject to structural load testing were performed to verify the design capacity, not only for high wind pressure values, but also for debris impact per ASTM E1886 and ASTM E1996. Also, construction of the test specimens allowed development of SSG installation techniques necessitated by the unique geometry of the silicone profile. Finally, correlation of physical test results with theoretical simulations is made, so evaluation of design confidence is possible. This design technique will introduce significant engineering advancement to the curtain wall industry.

  8. Palladium interaction with silicon carbide

    Energy Technology Data Exchange (ETDEWEB)

    Gentile, M., E-mail: Marialuisa.Gentile@manchester.ac.uk [Centre for Nuclear Energy Technology (C-NET), School of Mechanical, Aerospace and Civil Engineering, The University of Manchester, Manchester M13 9PL (United Kingdom); Xiao, P. [Materials Science Centre, School of Materials, The University of Manchester, Manchester M13 9PL (United Kingdom); Abram, T. [Centre for Nuclear Energy Technology (C-NET), School of Mechanical, Aerospace and Civil Engineering, The University of Manchester, Manchester M13 9PL (United Kingdom)

    2015-07-15

    In this work the palladium interaction with silicon carbide is investigated by means of complementary analytical techniques such as thermogravimetry (TG), differential scanning calorimetry (DSC), X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS). Thermoscans were carried out on pellets of palladium, α-SiC and β-SiC high purity powders in the temperature range comprised between 293 K and 1773 K, in order to study the effect of temperature on the palladium-silicon carbide reaction. Thermoscans of α-SiC pellets containing 5 at.%Pd show that during differential calorimetry scans three exothermic peaks occurred at 773 K, 1144 K and 1615 K, while thermoscans of β-SiC pellets containing 3 at.%Pd and 5 at.%Pd do not show peaks. For the pellet α-SiC–5 at.%Pd XRD spectra reveal that the first peak is associated with the formation of Pd{sub 3}Si and SiO{sub 2} phases, while the second peak and the third peak are correlated with the formation of Pd{sub 2}Si phase and the active oxidation of silicon carbide respectively. Thermogravimetry scans show weight gain and weight loss peaks due to the SiO{sub 2} phase formation and the active oxidation. Additionally XPS fittings reveal the development of SiC{sub x}O{sub y} phase during the first exothermic peak up to the temperature of 873 K. The experimental data reveals that alpha silicon carbide is attacked by palladium at lower temperatures than beta silicon carbide and the reaction mechanism between silicon carbide and palladium is strongly affected by silicon carbide oxidation.

  9. Palladium interaction with silicon carbide

    Science.gov (United States)

    Gentile, M.; Xiao, P.; Abram, T.

    2015-07-01

    In this work the palladium interaction with silicon carbide is investigated by means of complementary analytical techniques such as thermogravimetry (TG), differential scanning calorimetry (DSC), X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS). Thermoscans were carried out on pellets of palladium, α-SiC and β-SiC high purity powders in the temperature range comprised between 293 K and 1773 K, in order to study the effect of temperature on the palladium-silicon carbide reaction. Thermoscans of α-SiC pellets containing 5 at.%Pd show that during differential calorimetry scans three exothermic peaks occurred at 773 K, 1144 K and 1615 K, while thermoscans of β-SiC pellets containing 3 at.%Pd and 5 at.%Pd do not show peaks. For the pellet α-SiC-5 at.%Pd XRD spectra reveal that the first peak is associated with the formation of Pd3Si and SiO2 phases, while the second peak and the third peak are correlated with the formation of Pd2Si phase and the active oxidation of silicon carbide respectively. Thermogravimetry scans show weight gain and weight loss peaks due to the SiO2 phase formation and the active oxidation. Additionally XPS fittings reveal the development of SiCxOy phase during the first exothermic peak up to the temperature of 873 K. The experimental data reveals that alpha silicon carbide is attacked by palladium at lower temperatures than beta silicon carbide and the reaction mechanism between silicon carbide and palladium is strongly affected by silicon carbide oxidation.

  10. Indentation fatigue in silicon nitride, alumina and silicon carbide ceramics

    Indian Academy of Sciences (India)

    A K Mukhopadhyay

    2001-04-01

    Repeated indentation fatigue (RIF) experiments conducted on the same spot of different structural ceramics viz. a hot pressed silicon nitride (HPSN), sintered alumina of two different grain sizes viz. 1 m and 25 m, and a sintered silicon carbide (SSiC) are reported. The RIF experiments were conducted using a Vicker’s microhardness tester at various loads in the range 1–20 N. Subsequently, the gradual evolution of the damage was characterized using an optical microscope in conjunction with the image analysing technique. The materials were classified in the order of the decreasing resistance against repeated indentation fatigue at the highest applied load of 20 N. It was further shown that there was a strong influence of grain size on the development of resistance against repeated indentation fatigue on the same spot. Finally, the poor performance of the sintered silicon carbide was found out to be linked to its previous thermal history.

  11. Silicon-to-silicon wafer bonding using evaporated glass

    DEFF Research Database (Denmark)

    Weichel, Steen; Reus, Roger De; Lindahl, M.

    1998-01-01

    Anodic bending of silicon to silicon 4-in. wafers using an electron-beam evaporated glass (Schott 8329) was performed successfully in air at temperatures ranging from 200 degrees C to 450 degrees C. The composition of the deposited glass is enriched in sodium as compared to the target material....... The roughness of the as-deposited films was below 5 nm and was found to be unchanged by annealing at 500 degrees C for 1 h in air. No change in the macroscopic edge profiles of the glass film was found as a function of annealing; however, small extrusions appear when annealing above 450 degrees C. Annealing...... of silicon/glass structures in air around 340 degrees C for 15 min leads to stress-free structures. Bonded wafer pairs, however, show no reduction in stress and always exhibit compressive stress. The bond yield is larger than 95% for bonding temperatures around 350 degrees C and is above 80% for bonding...

  12. Silicon-micromachined microchannel plates

    Energy Technology Data Exchange (ETDEWEB)

    Beetz, Charles P. E-mail: NanoSystem@aol.com; Boerstler, Robert; Steinbeck, John; Lemieux, Bryan; Winn, David R. E-mail: winn@fair1.fairfield.edu

    2000-03-11

    Microchannel plates (MCP) fabricated from standard silicon wafer substrates using a novel silicon micromachining process, together with standard silicon photolithographic process steps, are described. The resulting SiMCP microchannels have dimensions of {approx}0.5 to {approx}25 {mu}m, with aspect ratios up to 300, and have the dimensional precision and absence of interstitial defects characteristic of photolithographic processing, compatible with positional matching to silicon electronics readouts. The open channel areal fraction and detection efficiency may exceed 90% on plates up to 300 mm in diameter. The resulting silicon substrates can be converted entirely to amorphous quartz (qMCP). The strip resistance and secondary emission are developed by controlled depositions of thin films, at temperatures up to 1200 deg. C, also compatible with high-temperature brazing, and can be essentially hydrogen, water and radionuclide-free. Novel secondary emitters and cesiated photocathodes can be high-temperature deposited or nucleated in the channels or the first strike surface. Results on resistivity, secondary emission and gain are presented.

  13. Silicon-micromachined microchannel plates

    Science.gov (United States)

    Beetz, Charles P.; Boerstler, Robert; Steinbeck, John; Lemieux, Bryan; Winn, David R.

    2000-03-01

    Microchannel plates (MCP) fabricated from standard silicon wafer substrates using a novel silicon micromachining process, together with standard silicon photolithographic process steps, are described. The resulting SiMCP microchannels have dimensions of ˜0.5 to ˜25 μm, with aspect ratios up to 300, and have the dimensional precision and absence of interstitial defects characteristic of photolithographic processing, compatible with positional matching to silicon electronics readouts. The open channel areal fraction and detection efficiency may exceed 90% on plates up to 300 mm in diameter. The resulting silicon substrates can be converted entirely to amorphous quartz (qMCP). The strip resistance and secondary emission are developed by controlled depositions of thin films, at temperatures up to 1200°C, also compatible with high-temperture brazing, and can be essentially hydrogen, water and radionuclide-free. Novel secondary emitters and cesiated photocathodes can be high-temperature deposited or nucleated in the channels or the first strike surface. Results on resistivity, secondary emission and gain are presented.

  14. Silicon nitride equation of state

    Science.gov (United States)

    Brown, Robert C.; Swaminathan, Pazhayannur K.

    2017-01-01

    This report presents the development of a global, multi-phase equation of state (EOS) for the ceramic silicon nitride (Si3N4).1 Structural forms include amorphous silicon nitride normally used as a thin film and three crystalline polymorphs. Crystalline phases include hexagonal α-Si3N4, hexagonal β-Si3N4, and the cubic spinel c-Si3N4. Decomposition at about 1900 °C results in a liquid silicon phase and gas phase products such as molecular nitrogen, atomic nitrogen, and atomic silicon. The silicon nitride EOS was developed using EOSPro which is a new and extended version of the PANDA II code. Both codes are valuable tools and have been used successfully for a variety of material classes. Both PANDA II and EOSPro can generate a tabular EOS that can be used in conjunction with hydrocodes. The paper describes the development efforts for the component solid phases and presents results obtained using the EOSPro phase transition model to investigate the solid-solid phase transitions in relation to the available shock data that have indicated a complex and slow time dependent phase change to the c-Si3N4 phase. Furthermore, the EOSPro mixture model is used to develop a model for the decomposition products; however, the need for a kinetic approach is suggested to combine with the single component solid models to simulate and further investigate the global phase coexistences.

  15. Silicon Heat Pipe Array

    Science.gov (United States)

    Yee, Karl Y.; Ganapathi, Gani B.; Sunada, Eric T.; Bae, Youngsam; Miller, Jennifer R.; Beinsford, Daniel F.

    2013-01-01

    Improved methods of heat dissipation are required for modern, high-power density electronic systems. As increased functionality is progressively compacted into decreasing volumes, this need will be exacerbated. High-performance chip power is predicted to increase monotonically and rapidly with time. Systems utilizing these chips are currently reliant upon decades of old cooling technology. Heat pipes offer a solution to this problem. Heat pipes are passive, self-contained, two-phase heat dissipation devices. Heat conducted into the device through a wick structure converts the working fluid into a vapor, which then releases the heat via condensation after being transported away from the heat source. Heat pipes have high thermal conductivities, are inexpensive, and have been utilized in previous space missions. However, the cylindrical geometry of commercial heat pipes is a poor fit to the planar geometries of microelectronic assemblies, the copper that commercial heat pipes are typically constructed of is a poor CTE (coefficient of thermal expansion) match to the semiconductor die utilized in these assemblies, and the functionality and reliability of heat pipes in general is strongly dependent on the orientation of the assembly with respect to the gravity vector. What is needed is a planar, semiconductor-based heat pipe array that can be used for cooling of generic MCM (multichip module) assemblies that can also function in all orientations. Such a structure would not only have applications in the cooling of space electronics, but would have commercial applications as well (e.g. cooling of microprocessors and high-power laser diodes). This technology is an improvement over existing heat pipe designs due to the finer porosity of the wick, which enhances capillary pumping pressure, resulting in greater effective thermal conductivity and performance in any orientation with respect to the gravity vector. In addition, it is constructed of silicon, and thus is better

  16. Solid structures with bioorganic films on silicon

    Science.gov (United States)

    Tutov, E. A.

    2012-06-01

    The electrophysical parameters of ovalbumin/silicon and propolis/silicon heterostructures are studied using impedance spectroscopy and high-frequency capacitance-voltage characteristics under water vapor sorption conditions.

  17. A silicon tracker for Christmas

    CERN Multimedia

    2008-01-01

    The CMS experiment installed the world’s largest silicon tracker just before Christmas. Marcello Mannelli: physicist and deputy CMS project leader, and Alan Honma, physicist, compare two generations of tracker: OPAL for the LEP (at the front) and CMS for the LHC (behind). There is quite a difference between 1m2 and 205m2.. CMS received an early Christmas present on 18 December when the silicon tracker was installed in the heart of the CMS magnet. The CMS tracker team couldn’t have hoped for a better present. Carefully wrapped in shiny plastic, the world’s largest silicon tracker arrived at Cessy ready for installation inside the CMS magnet on 18 December. This rounded off the year for CMS with a major event, the crowning touch to ten years of work on the project by over five hundred scientists and engineers. "Building a scientific instrument of this size and complexity is a huge technical a...

  18. Tunneling magnetoresistance of silicon chains

    Science.gov (United States)

    Matsuura, Yukihito

    2016-05-01

    The tunneling magnetoresistance (TMR) of a silicon chain sandwiched between nickel electrodes was examined by using first-principles density functional theory. The relative orientation of the magnetization in a parallel-alignment (PA) configuration of two nickel electrodes enhanced the current with a bias less than 0.4 V compared with that in an antiparallel-alignment configuration. Consequently, the silicon chain-nickel electrodes yielded good TMR characteristics. In addition, there was polarized spin current in the PA configuration. The spin polarization of sulfur atoms functioning as a linking bridge between the chain and nickel electrode played an important role in the magnetic effects of the electric current. Moreover, the hybridization of the sulfur 3p orbital and σ-conjugated silicon 3p orbital contributed to increasing the total current.

  19. Belle II Silicon Vertex Detector

    CERN Document Server

    Mohanty, Gagan B

    2015-01-01

    The Belle II experiment at the SuperKEKB collider in Japan is designed to indirectly probe new physics using approximately 50 times the data recorded by its predecessor. An accurate determination of the decay-point position of subatomic particles such as beauty and charm hadrons as well as a precise measurement of low-momentum charged particles will play a key role in this pursuit. These will be accomplished by a vertex detector, which comprises two layers of pixelated silicon detector and four layers of silicon vertex detector. We describe herein the design, prototyping and construction efforts of the Belle-II silicon vertex detector that is aimed to be commissioned towards the middle of 2017.

  20. Birefringence Measurements on Crystalline Silicon

    CERN Document Server

    Krüger, Christoph; Khalaidovski, Alexander; Steinlechner, Jessica; Nawrodt, Ronny; Schnabel, Roman; Lück, Harald

    2015-01-01

    Crystalline silicon has been proposed as a new test mass material in third generation gravitational wave detectors such as the Einstein Telescope (ET). Birefringence can reduce the interferometric contrast and can produce dynamical disturbances in interferometers. In this work we use the method of polarisation-dependent resonance frequency analysis of Fabry-Perot-cavities containing silicon as a birefringent medium. Our measurements show a birefringence of silicon along the (111) axis of the order of $\\Delta\\, n \\approx 10^{-7}$ at a laser wavelength of 1550nm and room temperature. A model is presented that explains the results of different settings of our measurements as a superposition of elastic strains caused by external stresses in the sample and plastic strains possibly generated during the production process. An application of our theory on the proposed ET test mass geometry suggests no critical effect on birefringence due to elastic strains.