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Sample records for capacitive micromachined ultrasonic

  1. Development of capacitive micromachined ultrasonic transducer for noncontact ultrasonic detection

    International Nuclear Information System (INIS)

    In this study, the capacitive micromachined ultrasonic transducer (cMUT) was developed. Theoretical analysis and finite element analysis of the behavior of membrane (such as resonance frequency, membrane deflection, collapse deflection and collapse voltage) of the cMUT were performed. The design parameters of the cMUT were estimated and are the dimension and thickness of membrane, thickness of sacrificial layer, thickness and size of electrode, size of active element and so on. With the micro-fabrication process, the cMUT was fabricated on the silicon wafer. To measure the membrane displacement of cMUT, the Michelson phase modulation fiber interferometer was constructed. The measured membrane displacement was good agreed with the result of finite element analysis. To estimate the ultrasonic wave generated by the cMUT, the ultrasonic transceiver system was constructed. The developed cMUT shows a good performance and hence will be widely used to the filed of non-contact ultrasonic application.

  2. Encapsulation of Capacitive Micromachined Ultrasonic Transducers Using Viscoelastic Polymer

    OpenAIRE

    Lin, Der-Song; Zhuang, Xuefeng; Wong, Serena H.; Kupnik, Mario; Khuri-Yakub, Butrus Thomas

    2010-01-01

    The packaging of a medical imaging or therapeutic ultrasound transducer should provide protective insulation while maintaining high performance. For a capacitive micromachined ultrasonic transducer (CMUT), an ideal encapsulation coating would therefore require a limited and predictable change on the static operation point and the dynamic performance, while insulating the high dc and dc actuation voltages from the environment. To fulfill these requirements, viscoelastic materials, such as poly...

  3. Electromechanical coupling factor of capacitive micromachined ultrasonic transducers

    Science.gov (United States)

    Caronti, Alessandro; Carotenuto, Riccardo; Pappalardo, Massimo

    2003-01-01

    Recently, a linear, analytical distributed model for capacitive micromachined ultrasonic transducers (CMUTs) was presented, and an electromechanical equivalent circuit based on the theory reported was used to describe the behavior of the transducer [IEEE Trans. Ultrason. Ferroelectr. Freq. Control 49, 159-168 (2002)]. The distributed model is applied here to calculate the dynamic coupling factor kw of a lossless CMUT, based on a definition that involves the energies stored in a dynamic vibration cycle, and the results are compared with those obtained with a lumped model. A strong discrepancy is found between the two models as the bias voltage increases. The lumped model predicts an increasing dynamic k factor up to unity, whereas the distributed model predicts a more realistic saturation of this parameter to values substantially lower. It is demonstrated that the maximum value of kw, corresponding to an operating point close to the diaphragm collapse, is 0.4 for a CMUT single cell with a circular membrane diaphragm and no parasitic capacitance (0.36 for a cell with a circular plate diaphragm). This means that the dynamic coupling factor of a CMUT is comparable to that of a piezoceramic plate oscillating in the thickness mode. Parasitic capacitance decreases the value of kw, because it does not contribute to the energy conversion. The effective coupling factor keff is also investigated, showing that this parameter coincides with kw within the lumped model approximation, but a quite different result is obtained if a computation is made with the more accurate distributed model. As a consequence, keff, which can be measured from the transducer electrical impedance, does not give a reliable value of the actual dynamic coupling factor.

  4. Encapsulation of Capacitive Micromachined Ultrasonic Transducers Using Viscoelastic Polymer.

    Science.gov (United States)

    Lin, Der-Song; Zhuang, Xuefeng; Wong, Serena H; Kupnik, Mario; Khuri-Yakub, Butrus Thomas

    2010-12-01

    The packaging of a medical imaging or therapeutic ultrasound transducer should provide protective insulation while maintaining high performance. For a capacitive micromachined ultrasonic transducer (CMUT), an ideal encapsulation coating would therefore require a limited and predictable change on the static operation point and the dynamic performance, while insulating the high dc and dc actuation voltages from the environment. To fulfill these requirements, viscoelastic materials, such as polydimethylsiloxane (PDMS), were investigated for an encapsulation material. In addition, PDMS, with a glass-transition temperature below room temperature, provides a low Young's modulus that preserves the static behavior; at higher frequencies for ultrasonic operation, this material becomes stiffer and acoustically matches to water. In this paper, we demonstrate the modeling and implementation of the viscoelastic polymer as the encapsulation material. We introduce a finite element model (FEM) that addresses viscoelasticity. This enables us to correctly calculate both the static operation point and the dynamic behavior of the CMUT. CMUTs designed for medical imaging and therapeutic ultrasound were fabricated and encapsulated. Static and dynamic measurements were used to verify the FEM and show excellent agreement. This paper will help in the design process for optimizing the static and the dynamic behavior of viscoelastic-polymer-coated CMUTs. PMID:21170294

  5. Experimental Analysis of Bisbenzocyclobutene Bonded Capacitive Micromachined Ultrasonic Transducers.

    Science.gov (United States)

    Manwar, Rayyan; Chowdhury, Sazzadur

    2016-01-01

    Experimental measurement results of a 1.75 mm × 1.75 mm footprint area Capacitive Micromachined Ultrasonic Transducer (CMUT) planar array fabricated using a bisbenzocyclobutene (BCB)-based adhesive wafer bonding technique has been presented. The array consists of 40 × 40 square diaphragm CMUT cells with a cavity thickness of 900 nm and supported by 10 µm wide dielectric spacers patterned on a thin layer of BCB. A 150 µm wide one µm thick gold strip has been used as the contact pad for gold wire bonding. The measured resonant frequency of 19.3 MHz using a Polytec™ laser Doppler vibrometer (Polytec™ MSA-500) is in excellent agreement with the 3-D FEA simulation result using IntelliSuite™. An Agilent ENA5061B vector network analyzer (VNA) has been used for impedance measurement and the resonance and anti-resonance values from the imaginary impedance curve were used to determine the electromechanical coupling co-efficient. The measured coupling coefficient of 0.294 at 20 V DC bias exhibits 40% higher transduction efficiency as compared to a measured value published elsewhere for a silicon nitride based CMUT. A white light interferometry method was used to measure the diaphragm deflection profiles at different DC bias. The diaphragm center velocity was measured for different sub-resonant frequencies using a Polytec™ laser Doppler vibrometer that confirms vibration of the diaphragm at different excitation frequencies and bias voltages. Transmit and receive operations of CMUT cells were characterized using a pitch-catch method and a -6 dB fractional bandwidth of 23% was extracted from the received signal in frequency domain. From the measurement, it appears that BCB-based CMUTs offer superior transduction efficiency as compared to silicon nitride or silicon dioxide insulator-based CMUTs, and provide a very uniform deflection profile thus making them a suitable candidate to fabricate highly energy efficient CMUTs. PMID:27347955

  6. Singulation for imaging ring arrays of capacitive micromachined ultrasonic transducers

    International Nuclear Information System (INIS)

    Singulation of MEMS is a critical step in the transition from wafer-level to die-level devices. As is the case for capacitive micromachined ultrasound transducer (CMUT) ring arrays, an ideal singulation must protect the fragile membranes from the processing environment while maintaining a ring array geometry. The singulation process presented in this paper involves bonding a trench-patterned CMUT wafer onto a support wafer, deep reactive ion etching (DRIE) of the trenches, separating the CMUT wafer from the support wafer and de-tethering the CMUT device from the CMUT wafer. The CMUT arrays fabricated and singulated in this process were ring-shaped arrays, with inner and outer diameters of 5 mm and 10 mm, respectively. The fabricated CMUT ring arrays demonstrate the ability of this method to successfully and safely singulate the ring arrays and is applicable to any arbitrary 2D shaped MEMS device with uspended microstructures, taking advantage of the inherent planar attributes of DRIE. (technical note)

  7. Capacitive micromachined ultrasonic transducer for ultra-low pressure measurement: Theoretical study

    OpenAIRE

    Zhikang Li; Libo Zhao; Zhuangde Jiang; Sina Akhbari; Jianjun Ding; Yihe Zhao; Yulong Zhao; Liwei Lin

    2015-01-01

    Ultra-low pressure measurement is necessary in many areas, such as high-vacuum environment monitoring, process control and biomedical applications. This paper presents a novel approach for ultra-low pressure measurement where capacitive micromachined ultrasonic transducers (CMUTs) are used as the sensing elements. The working principle is based on the resonant frequency shift of the membrane under the applied pressure. The membranes of the biased CMUTs can produce a larger resonant frequency ...

  8. Development of Capacitive Micromachined Ultrasonic Transducer (I) - Analysis of the Membrane Behavior

    International Nuclear Information System (INIS)

    This study was conducted to develop a capacitive micromachined ultrasonic transducer (cMUT) which enable to high efficient non-contact transmit and receive the ultrasonic wave in air. Theoretical analysis and finite element analysis of the behavior of membrane (such as resonance frequency, membrane deflection, collapse deflection and collapse voltage) of the cMUT were performed. The design parameters of the cMUT such as the dimension and thickness of membrane, thickness of sacrificial layer, thickness and size of electrode were estimated. The resonance frequency of the membrane increased as the thickness of the membrane increased but decreased as the diameter of the membrane increased. The deflection of the membrane increased as d-c bias voltage increased. The collapse voltage of the membrane was analyzed

  9. Capacitive micromachined ultrasonic transducers with diffraction-based integrated optical displacement detection.

    Science.gov (United States)

    Hall, Neal A; Lee, Wook; Degertekin, F Levent

    2003-11-01

    Capacitive detection limits the performance of capacitive micromachined ultrasonic transducers (CMUTs) by providing poor sensitivity below megahertz frequencies and limiting acoustic power output by imposing constraints on the membrane-substrate gap height. In this paper, an integrated optical interferometric detection method for CMUTs, which provides high displacement sensitivity independent of operation frequency and device capacitance, is reported. The method also enables optoelectronics integration in a small volume and provides optoelectronic isolation between transmit and receive electronics. Implementation of the method involves fabricating CMUTs on transparent substrates and shaping the electrode under each individual CMUT membrane in the form of an optical diffraction grating. Each CMUT membrane thus forms a phase-sensitive optical diffraction grating structure that is used to measure membrane displacements down to 2 x 10(-4) A/square root(Hz) level in the dc to 2-MHz range. Test devices are fabricated on quartz substrates, and ultrasonic array imaging in air is performed using a single 4-mm square CMUT consisting of 19 x 19 array of membranes operating at 750 kHz. PMID:14682641

  10. A low pull-in SU-8 based Capacitive Micromachined Ultrasonic Transducer for medical imaging applications.

    Science.gov (United States)

    Joseph, Jose; Singh, Shiv Govind; Vanjari, Siva Rama Krishna

    2014-01-01

    In this paper we present a thorough analysis of a low pull-in voltage Capacitive Micromachined Ultrasonic Transducer (CMUT) using SU-8 as the membrane material. It is designed to operate at 1 MHz frequency that has a wide range of applications including the imaging of deeper organs. We also propose a simple state-of-the-art fabrication methodology for the same. As compared to the standard Silicon Nitride CMUTs, the proposed structure gives the same electromechanical coupling coefficient with lower membrane dimensions and low pull-in voltage which in turn results in reduced area and power consumption. Moreover the proposed fabrication methodology is a low temperature process which makes it CMOS compatible. PMID:25570229

  11. Modeling and analysis of the membrane-behavior in capacitive micromachined ultrasonic transducer

    International Nuclear Information System (INIS)

    In this study, theoretical analysis and finite element analysis of the behavior of membrane (such as resonance frequency, membrane deflection, collapse deflection and collapse voltage) in the capacitive micromachined ultrasonic transducer (cMUT) were performed. The design parameter of the cMUT were estimated and are the dimension and thickness of membrane, thickness of sacrificed layer, thickness and size of electrode, size of active element and so on. The resonance frequency of the membrane increased as the thickness of the membrane increased but decreased as the diameter of the membrane increased. The deflection of the membrane increased as d-c bias voltage increased. The collapse voltage of the membrane was predicted.

  12. Modeling and analysis of the membrane-behavior in capacitive micromachined ultrasonic transducer

    International Nuclear Information System (INIS)

    In this study, theoretical analysis and finite element analysis of the behavior of membrane (such as resonance frequency, membrane deflection, collapse deflection and collapse voltage) in the capacitive micromachined ultrasonic transducer (cMUT) were performed. The design parameters of the cMUT were estimated and are the dimension and thickness of membrane, thickness of sacrificial layer, thickness and size of electrode, size of active element and so on. The resonance frequency of the membrane increased as the thickness of the membrane increased but decreased as the diameter of the membrane increased. The deflection of the membrane increased as d-c bias voltage increased. The collapse voltage of the membrane was predicted.

  13. Two Capacitive Micro-Machined Ultrasonic Transducers for Wind Speed Measurement

    Science.gov (United States)

    Bui, Gia Thinh; Jiang, Yu-Tsung; Pang, Da-Chen

    2016-01-01

    This paper presents a new wind speed measurement method using a single capacitive micro-machined ultrasonic transducer (CMUT). The CMUT was arranged perpendicular to the direction of the wind flow, and a reflector was set up a short distance away, facing the CMUT. To reduce the size, weight, cost, and power consumption of conventional ultrasonic anemometers this study proposes two CMUT designs for the measurement of wind speed using either the amplitude of the signal or the time of flight (TOF). Each CMUT with a double array element design can transmit and receive signals in five different operation modes. Experiments showed that the two CMUT designs utilizing the TOF were better than those utilizing the amplitude of the signal for wind speed measurements ranging from 1 m/s to 10 m/s, providing a measurement error of less than 0.2 m/s. These results indicate that the sensitivity of the TOF is independent of the five operation modes. PMID:27271625

  14. Capacitive Micromachined Ultrasonic Transducer Arrays for Integrated Diagnostic/Therapeutic Catheters

    Science.gov (United States)

    Wong, Serena H.; Wygant, Ira O.; Yeh, David T.; Zhuang, Xuefeng; Bayram, Baris; Kupnik, Mario; Oralkan, Omer; Ergun, A. Sanli; Yaralioglu, Goksen G.; Khuri-Yakub, Butrus T.

    2006-05-01

    In recent years, medical procedures have become increasingly non-invasive. These include endoscopic procedures and intracardiac interventions (e.g., pulmonary vein isolation for treatment of atrial fibrillation and plaque ablation for treatment of arteriosclerosis). However, current tools suffer from poor visualization and difficult coordination of multiple therapeutic and imaging devices. Dual-mode (imaging and therapeutic) ultrasound arrays provide a solution to these challenges. A dual-mode transducer can provide focused, noncontact ultrasound suitable for therapy and can be used to provide high quality real-time images for navigation and monitoring of the procedure. In the last decade, capacitive micromachined ultrasonic transducers (CMUTs), have become an attractive option for ultrasonic imaging systems due to their fabrication flexibility, improved bandwidth, and integration with electronics. The CMUT's potential in therapeutic applications has also been demonstrated by surface output pressures as high as 1MPa peak to peak and continuous wave (CW) operation. This paper reviews existing interventional CMUT arrays, demonstrates the feasibility of CMUTs for high intensity focused ultrasound (HIFU), and presents a design for the next-generation CMUTs for integrated imaging and HIFU endoscopic catheters.

  15. Capacitive micromachined ultrasonic transducer for ultra-low pressure measurement: Theoretical study

    Science.gov (United States)

    Li, Zhikang; Zhao, Libo; Jiang, Zhuangde; Akhbari, Sina; Ding, Jianjun; Zhao, Yihe; Zhao, Yulong; Lin, Liwei

    2015-12-01

    Ultra-low pressure measurement is necessary in many areas, such as high-vacuum environment monitoring, process control and biomedical applications. This paper presents a novel approach for ultra-low pressure measurement where capacitive micromachined ultrasonic transducers (CMUTs) are used as the sensing elements. The working principle is based on the resonant frequency shift of the membrane under the applied pressure. The membranes of the biased CMUTs can produce a larger resonant frequency shift than the diaphragms with no DC bias in the state-of-the-art resonant pressure sensors, which contributes to pressure sensitivity improvement. The theoretical analysis and finite element method (FEM) simulation were employed to study the relationship between the resonant frequency and the pressure. The results demonstrated excellent capability of the CMUTs for ultra-low pressure measurement. It is shown that the resonant frequency of the CMUT varies linearly with the applied pressure. A sensitivity of more than 6.33 ppm/Pa (68 kHz/kPa) was obtained within a pressure range of 0 to 100 Pa when the CMUTs were biased at a DC voltage of 90% of the collapse voltage. It was also demonstrated that the pressure sensitivity can be adjusted by the DC bias voltage. In addition, the effects of air damping and ambient temperature on the resonant frequency were also studied. The effect of air damping is negligible for the pressures below 1000 Pa. To eliminate the temperature effect on the resonant frequency, a temperature compensating method was proposed.

  16. Capacitive micromachined ultrasonic transducer for ultra-low pressure measurement: Theoretical study

    Directory of Open Access Journals (Sweden)

    Zhikang Li

    2015-12-01

    Full Text Available Ultra-low pressure measurement is necessary in many areas, such as high-vacuum environment monitoring, process control and biomedical applications. This paper presents a novel approach for ultra-low pressure measurement where capacitive micromachined ultrasonic transducers (CMUTs are used as the sensing elements. The working principle is based on the resonant frequency shift of the membrane under the applied pressure. The membranes of the biased CMUTs can produce a larger resonant frequency shift than the diaphragms with no DC bias in the state-of-the-art resonant pressure sensors, which contributes to pressure sensitivity improvement. The theoretical analysis and finite element method (FEM simulation were employed to study the relationship between the resonant frequency and the pressure. The results demonstrated excellent capability of the CMUTs for ultra-low pressure measurement. It is shown that the resonant frequency of the CMUT varies linearly with the applied pressure. A sensitivity of more than 6.33 ppm/Pa (68 kHz/kPa was obtained within a pressure range of 0 to 100 Pa when the CMUTs were biased at a DC voltage of 90% of the collapse voltage. It was also demonstrated that the pressure sensitivity can be adjusted by the DC bias voltage. In addition, the effects of air damping and ambient temperature on the resonant frequency were also studied. The effect of air damping is negligible for the pressures below 1000 Pa. To eliminate the temperature effect on the resonant frequency, a temperature compensating method was proposed.

  17. Optical vibration measurements of cross coupling effects in capacitive micromachined ultrasonic transducer arrays

    Science.gov (United States)

    Leirset, Erlend; Aksnes, Astrid

    2011-05-01

    Optical vibration measurement systems are excellent tools for characterizing ultrasonic transducers. This paper presents measurements on immersed arrays of capacitive ultrasonic transducers (CMUTs) using a heterodyne interferometer. The interferometer allows measurements of vibrations from DC up to 1 GHz with a noise floor of ~1pm/√Hz. Previously CMUTs have been characterized in air. The transducer is intended for intravascular use. Therefore the CMUTs were characterized in the transparent fluids kerosene and rapeseed oil that have acoustic properties closer to blood. The optical measurements on immersed CMUTs were validated by assessing the measurement errors caused by the acousto optic effects in the fluid. When immersed there is significant cross coupling between individual CMUTs within an array. Simulations presented here indicate that this causes an acoustic wave mode that is bound to the interface between the CMUTs and the fluid. This is confirmed by measurements of the phase velocity and attenuation coefficient of this wave. The measurement results indicate that the wave exists up to a maximum frequency and that the attenuation constant increases with increasing frequency. Rapeseed oil causes a significantly larger attenuation coefficient than kerosene, which most probably is due to a considerable difference in fluid viscosities. There was a mismatch between the simulated and measured phase velocity for low frequencies. It is likely that the cause of this is coupling between the fluid CMUT interface waves and Lamb waves in the substrate of the CMUT array. Measurements performed with the heterodyne interferometer have confirmed the presence of dispersive waves bound to the surface of the transducer by directly showing their propagation along the array. The setup has also characterized the bound waves by measuring dispersion relations.

  18. Capacitive micromachined ultrasonic transducers using commercial multi-user MUMPs process: capability and limitations.

    Science.gov (United States)

    Liu, Jessica; Oakley, Clyde; Shandas, Robin

    2009-12-01

    The objective of this work is to construct capacitive micromachined ultrasound transducers (cMUTs) using multi-user microelectromechanical systems (MEMS) processess (MUMPs) and to analyze the capability of this process relative to the customized processes commonly in use. The MUMPs process has the advantages of low cost and accessibility to general users since it is not necessary to have access to customized fabrication capability such as wafer-bonding and sacrificial release processes. While other researchers have reported fabricating cMUTs using the MUMPs process none has reported the limitations in the process that arise due to the use of standard design rules that place limitations on the material thicknesses, gap thicknesses, and materials that may be used. In this paper we explain these limitations, and analyze the capabilities using 1D modeling, Finite Element Analysis, and experimental devices. We show that one of the limitations is that collapse voltage and center frequency can not be controlled independently. However, center frequencies up to 9 MHz can be achieved with collapse voltages of less than 200 V making such devices suitable for medical and non-destructive evaluation imaging applications. Since the membrane and base electrodes are made of polysilicon, there is a larger series resistance than that resulting from processes that use metal electrodes. We show that the series resistance is not a significant problem. The conductive polysilicon can also destroy the cMUT if the top membrane is pulled in the bottom. As a solution we propose the application of an additional dielectric layer. Finally we demonstrate a device built with a novel beam construction that produces transmitted pressure pulse into air with 6% bandwidth and agrees reasonably well with the 1D model. We conclude that cMUTs made with MUMPs process have some limitations that are not present in customized processes. However, these limitations may be overcome with the proper design

  19. Design and Test of Capacitance Micro-machined Ultrasonic Transducer%微电容超声传感器的设计与测试

    Institute of Scientific and Technical Information of China (English)

    穆林枫; 张文栋; 何常德; 张睿; 宋金龙; 薛晨阳

    2015-01-01

    Due to the problem of higher parasitic of Capacitance Micro-machined Ultrasonic Transducer ( CMUT),isolation technology was adopted to apart the vibrating membrane from top electrode,which avoided the effect of doping.The capacitance change rate was the main line of the paper,the calculation and simulation of micro transducer and detection circuit were presented, which built the road between micro transducer and detection circuit.Test system underwater was also conducted.The test results show that the actual output voltage is 0.8 V,and the theory value is 0.61 V,which demonstrates the applicability of CMUT and the feasibility of test system.%针对现有微电容超声传感器( CMUT)寄生电容大的问题,采用绝缘技术将振动薄膜与上电极金属完全隔离的方法,避免了掺杂效应的发生,从而减小了寄生电容。文中以电容变化率为主线,分别对微传感器和跨阻检测电路的电容变化率进行了计算和仿真,建立了传感器与电路检测的通道,并通过水下测试系统的搭建,对其进行实验验证。测试结果表明,实际输出电压的值为0.8 V,与理论计算值0.61 V相近,从而验证了CMUT的可用性及其测试系统的可行性。

  20. Integration of Capacitive Micromachined Ultrasound Transducers to Microfluidic Devices

    KAUST Repository

    Viržonis, Darius

    2013-10-22

    The design and manufacturing flexibility of capacitive micromachined ultrasound transducers (CMUT) makes them attractive option for integration with microfluidic devices both for sensing and fluid manipulation. CMUT concept is introduced here by presentin

  1. Finite element analysis of underwater capacitor micromachined ultrasonic transducers.

    Science.gov (United States)

    Roh, Yongrae; Khuri-Yakub, Butrus T

    2002-03-01

    A simple electro-mechanical equivalent circuit model is used to predict the behavior of capacitive micromachined ultrasonic transducers (cMUT). Most often, cMUTs are made in silicon and glass plates that are in the 0.5 mm to 1 mm range in thickness. The equivalent circuit model of the cMUT lacks important features such as coupling to the substrate and the ability to predict cross-talk between elements of an array of transducers. To overcome these deficiencies, a flnite element model of the cMUT is constructed using the commercial code ANSYS. Calculation results of the complex load impedance seen by single capacitor cells are presented, then followed by a calculation of the plane wave real load impedance seen by a parallel combination of many cells that are used to make a transducer. Cross-talk between 1-D array elements is found to be due to two main sources: coupling through a Stoneley wave propagating at the transducer-water interface and coupling through Lamb waves propagating in the substrate. To reduce the cross-talk level, the effect of structural variations of the substrate are investigated, which includes a change of its thickness and etched trenches or polymer walls between array elements. PMID:12322877

  2. Micromachined capacitive pressure sensor with signal conditioning electronics

    DEFF Research Database (Denmark)

    Fragiacomo, Giulio

    Micromachined capacitive pressure sensors for harsh environment together with interfacing electronic circuits have been studied in this project. Micro-electromechanical systems (MEMS) have been proposed as substitutes for macro scale sensor’s systems in many different fields and are the only...... possible solution in many cases where, for example, the dimensions of the sensing element is the limiting factor. Furthermore, MEMS can significantly reduce costs and power consumption being the best candidate for consumer electronics such as mobile phones and cameras, or for the automotive industry where...... a great deal of sensors are used. Pressure sensors are among the most successful MEMS and are used in a huge variety of applications. In this project an absolute capacitive pressure sensor has been developed with the aim to integrate it in pump control systems to improve the efficiency of the pump...

  3. An Air-Coupled Multiple Moving Membrane Micromachined Ultrasonic Transducer With Inverse Biasing Functionality.

    Science.gov (United States)

    Emadi, Arezoo; Buchanan, Douglas A

    2016-08-01

    A novel air-coupled multiple moving membrane-capacitive micromachined ultrasonic transducer ( [Formula: see text]-CMUT) with individually biased deflectable plates has been developed. Unlike the conventional capacitive micromachined ultrasonic transducer, this device cell structure includes an additional deflectable plate that is suspended underneath the transducer top plate. This added flexible plate contributes to the device signal transmission and reception. It is demonstrated that due to the presence of this added moving plate, the transducer is capable of operating under inverse bias condition, where the driving voltage is sandwiched between two grounded electrodes. COMSOL electromechanical simulations were conducted to investigate the influence of the transducer additional moving plate. A set of three individuals and an array of [Formula: see text]-CMUT transducers were fabricated using a sacrificial technique and with resonant frequencies ranging from 0.8 to 2.1 MHz. Electrical, optical, and pitch-catch acoustic measurements were performed to characterize the transducers properties under inverse bias condition. The experimental results are shown to be in good agreement with the simulation results for all of the fabricated transducers. It is shown that these transducers are fully functional under both normal and inverse bias conditions without any degradation in the transducer performance. PMID:27254861

  4. Resonant gravimetric immunosensing based on capacitive micromachined ultrasound transducers

    KAUST Repository

    Viržonis, Darius

    2014-04-08

    High-frequency (40 MHz) and low-frequency (7 MHz) capacitive micromachined ultrasound transducers (CMUT) were fabricated and tested for use in gravimetric detection of biomolecules. The low-frequency CMUT sensors have a gold-coated surface, while the high-frequency sensors have a silicon nitride surface. Both surfaces were functionalized with bovine leukemia virus antigen gp51 acting as the antigen. On addition of an a specific antibody labeled with horseradish peroxidase (HRP), the antigen/antibody complex is formed on the surface and quantified by HRP-catalyzed oxidation of tetramethylbenzidine. It has been found that a considerably smaller quantity of immuno complex is formed on the high frequency sensor surface. In parallel, the loading of the surface of the CMUT was determined via resonance frequency and electromechanical resistance readings. Following the formation of the immuno complexes, the resonance frequencies of the low-frequency and high-frequency sensors decrease by up to 420 and 440 kHz, respectively. Finite element analysis reveals that the loading of the (gold-coated) low frequency sensors is several times larger than that on high frequency sensors. The formation of the protein film with pronounced elasticity and stress on the gold surface case is discussed. We also discuss the adoption of this method for the detection of DNA using a hybridization assay following polymerase chain reaction.

  5. Dynamic mechanism and its modelling of micromachined electrostatic ultrasonic transducers

    Institute of Scientific and Technical Information of China (English)

    葛立峰

    1999-01-01

    A tensile-plate-on-air-spring model (or called TDK model for short) for micromachined electrostatic ultrasonic transducers has been developed based on a thorough investigation of their dynamic mechanism. The mechanical stiffness effects caused by the compressibility of air gaps, bending stiffness of the diaphragm and in-plane tension applied to the diaphragm, together with an electrostatic negative stiffness effect are included completely in the model. Desired particular fundamental frequency and bandwidth can be obtained by only properly tailoring the geometry, dimensions and materials of transducers according to the model, which provides thereby a reliable theoretical basis for the understanding and optimised design of such transducers.

  6. Theoretical model and optimal design of silicon micromachined ultrasonic imaging transducers

    Institute of Scientific and Technical Information of China (English)

    GE; LiFeng

    2007-01-01

    A theoretical model and mathematical description for silicon micromachined electrostatic or capacitive ultrasonic imaging transducers have been developed. According to the model the basic performance parameters of such a transducer, such as natural frequencies, eigenfunctions, resonance and anti-resonance frequencies, and the mechanical impedance of the diaphragm can be predicted from the geometry of the transducer and property parameters of materials used. The paper reveals that this type of transducers has two basic operation modes, corresponding to the resonance of a mass-spring oscillator comprised of the diaphragm and the air cushion, and the first-order bending mode of the diaphragm itself respectively, and presents an optimal method for extending the bandwidth by making the two modes coupled, and thereby provides a theoretical basis for the optimal design.

  7. Waveguide piezoelectric micromachined ultrasonic transducer array for short-range pulse-echo imaging

    Science.gov (United States)

    Lu, Y.; Tang, H.; Wang, Q.; Fung, S.; Tsai, J. M.; Daneman, M.; Boser, B. E.; Horsley, D. A.

    2015-05-01

    This paper presents an 8 × 24 element, 100 μm-pitch, 20 MHz ultrasound imager based on a piezoelectric micromachined ultrasonic transducer (PMUT) array having integrated acoustic waveguides. The 70 μm diameter, 220 μm long waveguides function both to direct acoustic waves and to confine acoustic energy, and also to provide mechanical protection for the PMUT array used for surface-imaging applications such as an ultrasonic fingerprint sensor. The imager consists of a PMUT array bonded with a CMOS ASIC using wafer-level conductive eutectic bonding. This construction allows each PMUT in the array to have a dedicated front-end receive amplifier, which together with on-chip analog multiplexing enables individual pixel read-out with high signal-to-noise ratio through minimized parasitic capacitance between the PMUT and the front-end amplifier. Finite element method simulations demonstrate that the waveguides preserve the pressure amplitude of acoustic pulses over distances of 600 μm. Moreover, the waveguide design demonstrated here enables pixel-by-pixel readout of the ultrasound image due to improved directivity of the PMUT by directing acoustic waves and creating a pressure field with greater spatial uniformity at the end of the waveguide. Pulse-echo imaging experiments conducted using a one-dimensional steel grating demonstrate the array's ability to form a two-dimensional image of a target.

  8. Touch mode micromachined capacitive pressure sensor with signal conditioning electronics

    DEFF Research Database (Denmark)

    Fragiacomo, Giulio; Eriksen, Gert F.; Christensen, Carsten;

    2010-01-01

    In the last decades, pressure sensors have been one of the greatest successes of the MEMS industry. Many companies are using them in a variety of applications from the automotive to the environmental field. Currently piezoresistive pressure sensors are the most developed, and a well established...... the measurements done on the devices, was investigated. Fabrication was carried on at Danchip cleanrooms where fusion bonding was used in order to obtain a thin silicon plate on top of a sealed vacuum cavity (Fig. 2). A viable signal conditioning scheme for capacitive pressure sensing was simulated and implemented....... A measurement setup was arranged and tested for accuracy and reliability with respect to hysteresis. Finally, designs with different radii of the top plate were characterized by a capacitance versus pressure curve at different frequencies and temperatures (Fig. 3). Industrial possibilities Energy saving systems...

  9. A top-crossover-to-bottom addressed segmented annular array using piezoelectric micromachined ultrasonic transducers

    Science.gov (United States)

    Jung, Joontaek; Lee, Wonjun; Kang, Woojin; Hong, Hyeryung; Yuen Song, Hi; Oh, Inn-yeal; Park, Chul Soon; Choi, Hongsoo

    2015-11-01

    We design and fabricate segmented annular arrays (SAAs) using piezoelectric micromachined ultrasonic transducers (pMUTs) to demonstrate the feasibility of acoustic focusing of ultrasound. The fabricated SAAs have 25 concentric top-electrode signal lines and eight bottom-electrodes for grounding to enable electronic steering of selectively grouped ultrasonic transducers from 2393 pMUT elements. Each element in the array is connected by top-crossover-to-bottom metal bridges, which reduce the parasitic capacitance. Circular-shaped pMUT elements, 120 μm in diameter, are fabricated using 1 μm-thick sol-gel lead zirconate titanate on a silicon wafer. To utilize the high-density pMUT array, a deep reactive ion etching process is used for anisotropic silicon etching to realize the transducer membranes. The resonant frequency and effective coupling coefficient of the elements, measured with an impedance analyzer, yields 1.517 MHz and 1.29%, respectively, in air. The SAAs using pMUTs are packaged on a printed circuit board and coated with parylene C for acoustic intensity measurements in water. The ultrasound generated by each segmented array is focused on a selected point in space. When a 5 Vpp, 1.5 MHz square wave is applied, the maximum spatial peak temporal average intensity ({{I}\\text{spta}} ) is found to be 79 mW cm-2 5 mm from the SAAs’ surface without beamforming. The beam widths (-3 dB) of ultrasonic radiation patterns in the elevation and azimuth directions are recorded as 3 and 3.4 mm, respectively. The results successfully show the feasibility of focusing ultrasound on a small area with SAAs using pMUTs.

  10. Highly sensitive micromachined capacitive pressure sensor with reduced hysteresis and low parasitic capacitance

    DEFF Research Database (Denmark)

    Pedersen, Thomas; Fragiacomo, Giulio; Hansen, Ole;

    2009-01-01

    This paper describes the design and fabrication of a capacitive pressure sensor that has a large capacitance signal and a high sensitivity of 76 pF/bar in touch mode operation. Due to the large signal, problems with parasitic capacitances are avoided and hence it is possible to integrate the sens...... bonding to create vacuum cavities. The exposed part of the sensor is perfectly flat such that it can be coated with corrosion resistant thin films. Hysteresis is an inherent problem in touch mode capacitive pressure sensors and a technique to significantly reduce it is presented....

  11. Simulating Capacitive Micromachined Ultrasonic Transducers (CMUTs) using Field II

    DEFF Research Database (Denmark)

    Bæk, David; Oralkan, Omer; Kupnik, Mario;

    2010-01-01

    Field II has been a recognized simulation tool for piezoceramic medical transducer arrays for more than a decade. The program has its strength in doing fast computations of the spatial impulse response (SIR) from array elements by dividing the elements into smaller mathematical elements (ME)s from...... which it calculates the SIR responses. The program features predefined models for classical transducer geometries, but currently none for the fast advancing CMUTs. This work addresses the assumptions required for modeling CMUTs with Field II. It is shown that rectangular array elements, populated...

  12. Micromachining techniques in developing high-frequency piezoelectric composite ultrasonic array transducers.

    Science.gov (United States)

    Liu, Changgeng; Djuth, Frank T; Zhou, Qifa; Shung, K Kirk

    2013-12-01

    Several micromachining techniques for the fabrication of high-frequency piezoelectric composite ultrasonic array transducers are described in this paper. A variety of different techniques are used in patterning the active piezoelectric material, attaching backing material to the transducer, and assembling an electronic interconnection board for transmission and reception from the array. To establish the feasibility of the process flow, a hybrid test ultrasound array transducer consisting of a 2-D array having an 8 × 8 element pattern and a 5-element annular array was designed, fabricated, and assessed. The arrays are designed for a center frequency of ~60 MHz. The 2-D array elements are 105 × 105 μm in size with 5-μm kerfs between elements. The annular array surrounds the square 2-D array and provides the option of transmitting from the annular array and receiving with the 2-D array. Each annular array element has an area of 0.71 mm(2) with a 16-μm kerf between elements. The active piezoelectric material is (1 - x) Pb(Mg1/3Nb2/3)O3-xPbTiO3 (PMN-PT)/epoxy 1-3 composite with a PMN-PT pillar lateral dimension of 8 μm and an average gap width of ~4 μm, which was produced by deep reactive ion etching (DRIE) dry etching techniques. A novel electric interconnection strategy for high-density, small-size array elements was proposed. After assembly, the array transducer was tested and characterized. The capacitance, pulse-echo responses, and crosstalk were measured for each array element. The desired center frequency of ~60 MHz was achieved and the -6-dB bandwidth of the received signal was ~50%. At the center frequency, the crosstalk between adjacent 2-D array elements was about -33 dB. The techniques described herein can be used to build larger arrays containing smaller elements. PMID:24297027

  13. Greenhouse Gas Molecule CO2 Detection Using a Capacitive Micromachined Ultrasound Transducer.

    Science.gov (United States)

    Barauskas, Dovydas; Pelenis, Donatas; Virzonis, Darius; Baltrus, John P; Baltrusaitis, Jonas

    2016-07-01

    We manufactured and tested a capacitive micromachined ultrasound transducer (CMUT)-based sensor for CO2 detection at environmentally relevant concentrations using polyethylenimine as a CO2 binding material. The assembly of a sensing chip was 10 × 20 mm, and up to 5 gases can potentially be detected simultaneously using a masking technique and different sensing materials. The limit of detection was calculated to be 0.033 CO2 vol % while the limit of quantification was calculated to be 0.102%. The sensor exhibited a linear response between 0.06% and 0.30% CO2 while concentrations close to those in flue gas can also be measured using dilution with inert gas. PMID:27321769

  14. Design, simulation and testing of capacitive micromachined ultrasound transducer-based phospholipidic biosensor elements

    International Nuclear Information System (INIS)

    In this study we present theoretical proof of the principle of using interdigital capacitive micromachined ultrasound transducers (CMUT IDTs) for the detection of phospholipid membrane elasticity. Proof of principle was needed to find out whether the new type of microelectromechanical sensors of the toxins incorporated with the lipid membranes was feasible. CMUT IDTs for 10 MHz operation in water, with 146 µm spaced double fingers were designed and fabricated using the surface micromachining technique. Fabricated CMUTs were tested for their resonance in air and for Scholte-type wave transmission in deionized water and isopropanol solutions containing 0%, 10% and 20% water. The amplitude and phase velocity of the excited and received Scholte waves were measured in a 200 µm height microchannel, capped with a thick layer of soft polymer, which suppressed the production of non-informative guided waves. It was determined that the average sensitivity of Scholte wave phase velocity within the given range of solution concentrations is 2.9 m s−1 per one percent. Experimental data were also used to verify the adequacy of the finite element model, which was found to be suitable for reliable prediction of the phospholipid membrane elasticity impact on the Scholte wave phase velocity or the resonance frequency in the present IDT structure. It was determined that for the analyzed conditions (the elasticity of simulated phospholipid membrane changed from 1 to 5 GPa) the sensitivity of the measurement channel is expected to be no worse than 2 kHz GPa−1 in terms of the Scholte wave and CMUT IDT resonance frequency. This leads to a positive conclusion on the feasibility of the new sensor type. (paper)

  15. Design, simulation and testing of capacitive micromachined ultrasound transducer-based phospholipidic biosensor elements

    Science.gov (United States)

    Sapeliauskas, E.; Vanagas, G.; Barauskas, D.; Mikolajunas, M.; Pakenas, E.; Pelenis, D.; Sergalis, G.; Jukna, T.; Virzonis, D.

    2015-07-01

    In this study we present theoretical proof of the principle of using interdigital capacitive micromachined ultrasound transducers (CMUT IDTs) for the detection of phospholipid membrane elasticity. Proof of principle was needed to find out whether the new type of microelectromechanical sensors of the toxins incorporated with the lipid membranes was feasible. CMUT IDTs for 10 MHz operation in water, with 146 µm spaced double fingers were designed and fabricated using the surface micromachining technique. Fabricated CMUTs were tested for their resonance in air and for Scholte-type wave transmission in deionized water and isopropanol solutions containing 0%, 10% and 20% water. The amplitude and phase velocity of the excited and received Scholte waves were measured in a 200 µm height microchannel, capped with a thick layer of soft polymer, which suppressed the production of non-informative guided waves. It was determined that the average sensitivity of Scholte wave phase velocity within the given range of solution concentrations is 2.9 m s-1 per one percent. Experimental data were also used to verify the adequacy of the finite element model, which was found to be suitable for reliable prediction of the phospholipid membrane elasticity impact on the Scholte wave phase velocity or the resonance frequency in the present IDT structure. It was determined that for the analyzed conditions (the elasticity of simulated phospholipid membrane changed from 1 to 5 GPa) the sensitivity of the measurement channel is expected to be no worse than 2 kHz GPa-1 in terms of the Scholte wave and CMUT IDT resonance frequency. This leads to a positive conclusion on the feasibility of the new sensor type.

  16. Capacitive Ultrasonic Transducer Development for Acoustic Anemometry on Mars

    Science.gov (United States)

    Leonard-Pugh, Eurion; Wilson, C.; Calcutt, S.; Davis, L.

    2012-10-01

    Previous Mars missions have used either mechanical or thermal anemometry techniques. The moving parts of mechanical anemometers are prone to damage during launch and landing and their inertia makes them unsuited for turbulence studies. Thermal anemometers have been used successfully on Mars but are difficult to calibrate and susceptible to varying ambient temperatures. In ultrasonic anemometry, wind speed and sound speed are calculated from two-way time-of-flight measurements between pairs of transducers; three pairs of transducers are used to return a 3-D wind vector. These high-frequency measurements are highly reliable and immune from drift. Piezo-electric ultrasonic anemometers are widely used on Earth due to their full-range accuracy and high measurement frequency. However these transducers have high acoustic impedances and would not work on Mars. We are developing low-mass capacitive ultrasonic transducers for Mars missions which have significantly lower acoustic impedances and would therefore have a much stronger coupling to the Martian atmosphere. These transducers consist of a metallised polymer film pulled taught against a machined metal backplane. The film is drawn towards the backplane by a DC bias voltage. A varying signal is used on top of the DC bias to oscillate the film; generating acoustic waves. This poster will look at the operation of such sensors and the developments necessary to operate the devices under Martian conditions. Transducer performance is determined primarily by two elements; the front film and the backplane. The sensitivity of the transducer is affected by the thickness of the front film; as well as the diameter, curvature and roughness of the metal backplane. We present data on the performance of the sensors and instrument design considerations including signal shapes and transducer arrangements.

  17. Droplet formation and ejection from a micromachined ultrasonic droplet generator: Visualization and scaling

    Science.gov (United States)

    Meacham, J. M.; Varady, M. J.; Degertekin, F. L.; Fedorov, A. G.

    2005-10-01

    Visualization and scaling of drop-on-demand and continuous-jet fluid atomization of water are presented to elucidate the fluid physics of the ejection process and characterize the modes of operation of a novel micromachined ultrasonic droplet generator. The device comprises a fluid reservoir that is formed between a bulk ceramic piezoelectric transducer and an array of liquid horn structures wet etched into (100) silicon. At resonance, the transducer generates a standing ultrasonic pressure wave within the cavity and the wave is focused at the tip of the nozzle by the horn structure. Device operation has been demonstrated by water droplet ejection from 5to10μm orifices at multiple resonant frequencies between 1 and 5MHz. The intimate interactions between focused ultrasonic pressure waves and capillary waves formed at the liquid-air interface located at the nozzle tip are found to govern the ejection dynamics, leading to different ejection modalities ranging from individual droplets to continuous jet. Specifically, we report the results of high-resolution stroboscopic optical imaging of the liquid-air interface evolution during acoustic pumping to elucidate the role of capillary waves in the droplet formation and ejection process. A basic understanding of the governing physics gained through careful visualization and scaling forms the basis for development of improved theoretical models for the droplet formation and ejection processes by accounting for key fluid mechanical features of the phenomena.

  18. Ultrasonic fingerprint sensor using a piezoelectric micromachined ultrasonic transducer array integrated with complementary metal oxide semiconductor electronics

    Energy Technology Data Exchange (ETDEWEB)

    Lu, Y.; Fung, S.; Wang, Q.; Horsley, D. A. [Berkeley Sensor and Actuator Center, University of California, Davis, 1 Shields Avenue, Davis, California 95616 (United States); Tang, H.; Boser, B. E. [Berkeley Sensor and Actuator Center, University of California, Berkeley, California 94720 (United States); Tsai, J. M.; Daneman, M. [InvenSense, Inc., 1745 Technology Drive, San Jose, California 95110 (United States)

    2015-06-29

    This paper presents an ultrasonic fingerprint sensor based on a 24 × 8 array of 22 MHz piezoelectric micromachined ultrasonic transducers (PMUTs) with 100 μm pitch, fully integrated with 180 nm complementary metal oxide semiconductor (CMOS) circuitry through eutectic wafer bonding. Each PMUT is directly bonded to a dedicated CMOS receive amplifier, minimizing electrical parasitics and eliminating the need for through-silicon vias. The array frequency response and vibration mode-shape were characterized using laser Doppler vibrometry and verified via finite element method simulation. The array's acoustic output was measured using a hydrophone to be ∼14 kPa with a 28 V input, in reasonable agreement with predication from analytical calculation. Pulse-echo imaging of a 1D steel grating is demonstrated using electronic scanning of a 20 × 8 sub-array, resulting in 300 mV maximum received amplitude and 5:1 contrast ratio. Because the small size of this array limits the maximum image size, mechanical scanning was used to image a 2D polydimethylsiloxane fingerprint phantom (10 mm × 8 mm) at a 1.2 mm distance from the array.

  19. Fabrication and characterization of a smart epitaxial piezoelectric micromachined ultrasonic transducer

    Energy Technology Data Exchange (ETDEWEB)

    Ozaki, Katsuya [Department of Electrical and Electronic Information Engg, Toyohashi University of Technology, Toyohashi, Aichi 441-8580 (Japan); Matin, Abdul, E-mail: matin.md.a@gmail.com [Department of Glass and Ceramic Engineering, Bangladesh University of Engg and Tech (BUET), Dhaka 1000 (Bangladesh); Numata, Yasuyuki [Department of Electrical and Electronic Information Engg, Toyohashi University of Technology, Toyohashi, Aichi 441-8580 (Japan); Akai, Daisuke [Electronics-Inspired Interdisciplinary Research Institute (EIIRIS), Toyohashi University of Technology Toyohashi, Toyohahsi, Aichi 441-8580 (Japan); Sawada, Kazuaki; Ishida, Makoto [Department of Electrical and Electronic Information Engg, Toyohashi University of Technology, Toyohashi, Aichi 441-8580 (Japan); Electronics-Inspired Interdisciplinary Research Institute (EIIRIS), Toyohashi University of Technology Toyohashi, Toyohahsi, Aichi 441-8580 (Japan)

    2014-12-15

    Highlights: • Highly [1 1 1] orientated functional PZT(1 1 1) thin film was grown on n-Si(1 1 1)/γ-Al{sub 2}O{sub 3}(1 1 1)/SrRuO{sub 3}(1 1 1). • Device performance of pMUT was studied using both experiment and modeling. • Material anisotropy played a significant role in the shifting of resonant frequency • pMUT shows high sensitivity for the transmission of ultrasonic pulses. • Successful realization of a piezoelectric ultrasonic transducer (pMUT) array. - Abstract: A novel piezoelectric micromachined ultrasonic transducer (pMUT) array was designed and fabricated using epitaxially grown functional Pb(Zr{sub 0.52}Ti{sub 0.48})O{sub 3} (PZT) thin film on Si(1 1 1)/γ-Al{sub 2}O{sub 3}(1 1 1)/SrRuO{sub 3}(1 1 1) substrate for biomedical applications. The crystallographic orientation of PZT film was controlled by the incorporation of epitaxial γ-Al{sub 2}O{sub 3} film on Si substrate. Modal shape of pMUT was analyzed employing advanced 3D finite element modeling taking the crystallographic anisotropy of materials and the properties of immersed medium (air or water) into account. Eigenfrequency with mode shapes has shown to have significant influence on transmitting-receiving characteristics of pMUT. Modal shapes of pMUT were also quantitatively determined using Laser Doppler Vibratometry (LDV). An excellent correlation was obtained between computational and experimental results. A significantly high sensitivity of 3.9 μV/kPa was obtained in an under-water ultrasonic wave transmission experiment conducted using fabricated pMUT as wave transmitter and a commercial transducer as receiver at a fundamental frequency of 1.20 MHz. Advanced FE computation thus serves as a tool to a priori optimize device structure for the successful transmission of ultrasonic waves with sufficient power to generate high resolution 3D imaging.

  20. Nonlinearity analysis of piezoelectric micromachined ultrasonic transducers based on couple stress theory

    Institute of Scientific and Technical Information of China (English)

    Xin Kang; Fu-Jun Yang; Xiao-Yuan He

    2012-01-01

    This paper studies the static deformation behavior of a piezoelectric micromachined ultrasonic transducer (PMUT) actuated by a strong external electric field.The transducer membrane consists of a piezoelectric layer,a passive layer and two electrode layers.The nonlinearities of the piezoelectric layer caused by electrostriction under a strong electric field are analyzed. Because the thickness of the transducer membrane is on the microscale,the size dependence of the deformation behavior is evaluated using the couple stress theory.The results show that the optimal ratio of the top electrode diameter and the membrane diameter is around 0.674.It is also found that this optimal value does not depend on any other parameters if the thicknesses of the two electrodes are negligible compared with those of the piezoelectric and passive layers.In addition,the nonlinearities of the piezoelectric layer will become stronger along with the increase of the electric field,which means that softening of the membrane stiffness occurs when a strong external electric field is applied.Meanwhile,the optimal thickness ratio for the passive layer and the piezoelectric layer is not equal to 1.0 which is usually adopted by previous researchers.Because there exists size dependence of membrane deformation,the optimal value of this thickness ratio needs to be greater than 1.0 on the microscale.

  1. PMN-PT single crystal thick films on silicon substrate for high-frequency micromachined ultrasonic transducers

    Energy Technology Data Exchange (ETDEWEB)

    Peng, J.; Lau, S.T.; Chao, C.; Dai, J.Y.; Chan, H.L.W. [The Hong Kong Polytechnic University, Department of Applied Physics and Materials Research Center, Hong Kong (China); Luo, H.S. [Chinese Academy of Sciences, The State Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Shanghai (China); Zhu, B.P.; Zhou, Q.F.; Shung, K.K. [University of Southern California, Department of Biomedical Engineering and NIH Transducer Resource Center, Los Angeles, CA (United States)

    2010-01-15

    In this work, a novel high-frequency ultrasonic transducer structure is realized by using PMNPT-on-silicon technology and silicon micromachining. To prepare the single crystalline PMNPT-on-silicon wafers, a hybrid processing method involving wafer bonding, mechanical lapping and wet chemical thinning is successfully developed. In the transducer structure, the active element is fixed within the stainless steel needle housing. The measured center frequency and -6 dB bandwidth of the transducer are 35 MHz and 34%, respectively. Owing to the superior electromechanical coupling coefficient (k{sub t}) and high piezoelectric constant (d{sub 33}) of PMNPT film, the transducer shows a good energy conversion performance with a very low insertion loss down to 8.3 dB at the center frequency. (orig.)

  2. A parallel-architecture parametric equalizer for air-coupled capacitive ultrasonic transducers.

    Science.gov (United States)

    McSweeney, Sean G; Wright, William M D

    2012-01-01

    Parametric equalization is rarely applied to ultrasonic transducer systems, for which it could be used on either the transmitter or the receiver to achieve a desired response. An optimized equalizer with both bump and cut capabilities would be advantageous for ultrasonic systems in applications in which variations in the transducer performance or the properties of the propagating medium produce a less-than-desirable signal. Compensation for non-ideal transducer response could be achieved using equalization on a device-by-device basis. Additionally, calibration of ultrasonic systems in the field could be obtained by offline optimization of equalization coefficients. In this work, a parametric equalizer for ultrasonic applications has been developed using multiple bi-quadratic filter elements arranged in a novel parallel arrangement to increase the flexibility of the equalization. The equalizer was implemented on a programmable system-on-chip (PSOC) using a small number of parallel 4th-order infinite impulse response switchedcapacitor band-pass filters. Because of the interdependency of the required coefficients for the switched capacitors, particle swarm optimization (PSO) was used to determine the optimum values. The response of a through-transmission system using air-coupled capacitive ultrasonic transducers was then equalized to idealized Hamming function or brick-wall frequencydomain responses. In each case, there was excellent agreement between the equalized signals and the theoretical model, and the fidelity of the time-domain response was maintained. The bandwidth and center frequency response of the system were significantly improved. It was also shown that the equalizer could be used on either the transmitter or the receiver, and the system could compensate for the effects of transmitterreceiver misalignment.

  3. Development of micro capacitive accelerometer for subsurface microseismic measurement; Micromachining ni yoru chika danseiha kenshutsu no tame no silicon yoryogata kasokudo sensor no seisaku

    Energy Technology Data Exchange (ETDEWEB)

    Nishizawa, M.; Niitsuma, H.; Esashi, M. [Tohoku University, Sendai (Japan). Faculty of Engineering

    1997-05-27

    A silicon capacitive accelerometer was fabricated to detect subsurface elastic waves by using micromachining technology. Characteristics required for it call for capability of detecting acceleration with amplitudes from 0.1 to 1 gal and flat amplitude characteristics in frequency bands of 10 Hz to several kHz. For the purpose of measuring transition phenomena, linear phase characteristics in the required bands must be guaranteed, cross sensitivity must be small, and resistance to water, pressure and heat is demanded. Sensitivity of the sensor is determined finally by noise level in a detection circuit. The sensor`s minimum detection capability was 40 mgal in the case of the distance between a weight and an electrode being 3 {mu}m. This specification value is a value realizable by the current micromachining technology. Dimensions for the weight and other members were decided with the natural frequency to make band width 2 kHz set to 4 kHz. Completion of the product has not been achieved yet, however, because of a problem that the weight gets stuck on the electrode plate in anode bonding in the assembly process. 7 refs., 5 figs., 1 tab.

  4. 静电驱动电容式微机械陀螺寄生Coriolis力的建模与分析%Modeling and Analysis of Coriolis Offset for Micromachined Gyroscope with Electrostatic Driving and Capacitive Sensing

    Institute of Scientific and Technical Information of China (English)

    莫冰; 郑琦; 刘晓为; 陈斯浩

    2011-01-01

    A micromachined gyroscope with electrostatic driving and capacitive sensing was investigated based on mechanical analysis of Coriolis offset, and an equivalent electrical model of micromachined gyroscope including Coriolis offset was established. This model was simulated and compared with the equivalent electrical model of micromachined gyroscope under ideal conditions. Results indicated that, for micromachined gyroscope with electrostatic driving and capacitive sensing, the Coriolis offset affected neither frequency nor phase of the desired signal, but it may reduce the amplitude of desired signal within 0. 2%o.%在静电驱动电容式微机械陀螺传感器结构的基础上,对寄生Coriolis力进行受力分析,建立了寄生Coriolis力的等效电学模型.比较分析了理想情况下微机械陀螺的等效电学模型以及包含寄生Coriolis力的等效电学模型,结果表明,对于静电驱动电容式微机械陀螺,寄生Coriolis力并不改变有用信号的频率及相位,对其峰峰值的衰减程度小于0.2‰.

  5. Wideband micromachined microphones with radio frequency detection

    Science.gov (United States)

    Hansen, Sean Thomas

    There are many commercial, scientific, and military applications for miniature wideband acoustic sensors, including monitoring the condition or wear of equipment, collecting scientific data, and identifying and localizing military targets. The application of semiconductor micromachining techniques to sensor fabrication has the potential to transform acoustic sensing with small, reproducible, and inexpensive silicon-based microphones. However, such sensors usually suffer from limited bandwidth and from non-uniformities in their frequency response due to squeeze-film damping effects and narrow air gaps. Furthermore, they may be too fragile to be left unattended in a humid or dusty outdoor environment. Silicon microphones that incorporate capacitive micromachined ultrasonic transducer membranes overcome some of the drawbacks of conventional microphones. These micromachined membranes are small and robust enough to be vacuum-sealed, and can withstand atmospheric pressure and submersion in water. In addition, the membrane mechanical response is flat from dc up to ultrasonic frequencies, resulting in a wideband sensor for accurate spectral analysis of acoustic signals. However, a sensitive detection scheme is necessary to detect the small changes in membrane displacement that result from using smaller, stiffer membranes than do conventional microphones. We propose a radio frequency detection technique, in which the capacitive membranes are incorporated into a transmission line. Variations in membrane capacitance due to impinging sound pressure are sensed through the phase variations of a carrier signal that propagates along the line. This dissertation examines the design, fabrication, modeling, and experimental measurements of wideband micromachined microphones using sealed ultrasonic membranes and RF detection. Measurements of fabricated microphones demonstrate less than 0.5 dB variation in their output responses between 0.1 Hz to 100 kHz under electrostatic actuation of

  6. Fully parameterized model of a voltage-driven capacitive coupled micromachined ohmic contact switch for RF applications

    International Nuclear Information System (INIS)

    A comprehensive and completely parameterized model is proposed to determine the related electrical and mechanical dynamic system response of a voltage-driven capacitive coupled micromechanical switch. As an advantage over existing parameterized models, the model presented in this paper returns within few seconds all relevant system quantities necessary to design the desired switching cycle. Moreover, a sophisticated and detailed guideline is given on how to engineer a MEMS switch. An analytical approach is used throughout the modelling, providing representative coefficients in a set of two coupled time-dependent differential equations. This paper uses an equivalent mass moving along the axis of acceleration and a momentum absorption coefficient. The model describes all the energies transferred: the energy dissipated in the series resistor that models the signal attenuation of the bias line, the energy dissipated in the squeezed film, the stored energy in the series capacitor that represents a fixed separation in the bias line and stops the dc power in the event of a short circuit between the RF and dc path, the energy stored in the spring mechanism, and the energy absorbed by mechanical interaction at the switch contacts. Further, the model determines the electrical power fed back to the bias line. The calculated switching dynamics are confirmed by the electrical characterization of the developed RF switch. The fabricated RF switch performs well, in good agreement with the modelled data, showing a transition time of 7 µs followed by a sequence of bounces. Moreover, the scattering parameters exhibit an isolation in the off-state of >8 dB and an insertion loss in the on-state of <0.6 dB up to frequencies of 50 GHz. The presented model is intended to be integrated into standard circuit simulation software, allowing circuit engineers to design the switch bias line, to minimize induced currents and cross actuation, as well as to find the mechanical structure dimensions

  7. Micromachined Integrated Transducers for Ultrasound Imaging

    DEFF Research Database (Denmark)

    la Cour, Mette Funding

    The purpose of this project is to develop capacitive micromachined ultrasonic transducers (CMUTs) for medical imaging. Medical ultrasound transducers used today are fabricated using piezoelectric materials and bulk processing. To fabricate transducers capable of delivering a higher imaging...... resolution it is however necessary to develop new fabrication methods that allows fabrication of transducer elements with smaller dimensions. By using microfabrication technology it is possible to push the dimensions down and provide higher design flexibility. This project is part of a large ultrasound...... project and collaboration with a lot of partners to improve medical ultrasound imaging. The focus in this part of the project is to design, fabricate and characterize 1D CMUT arrays. Two versions of 1D transducers are made, one at Stanford University and one at DTU. Electrical and acoustical...

  8. A Reuse Evaluation for Solar-Cell Silicon Wafers via Shift Revolution and Tool Rotation Using Magnetic Assistance in Ultrasonic Electrochemical Micromachining

    Directory of Open Access Journals (Sweden)

    P. S. Pa

    2013-01-01

    Full Text Available A new reuse fabrication using a tool module with rotation and revolution through a process of magnetic assistance in ultrasonic electrochemical micromachining (UEMM for removal of the surface layers from silicon wafers of solar cells is demonstrated. The target of the proposed reuse fabrication method is to replace the current approach, which uses strong acid and grinding and may damage the physical structure of silicon wafers and pollute to the environment. A precisely engineered clean production approach to removal of surface microstructure layers from silicon wafers is to develop a mass production system for recycling defective or discarded silicon wafers of solar cells that can reduce pollution and cost. The high revolution speed of the shift with the high rotation speed of the designed tool increases the discharge mobility and improves the removal effect associated with the high feed rate of the workpiece. High frequency and high power of ultrasonic with large electrolyte flow rate and high magnetic strengths with a small distance between the two magnets provide a large discharge effect and good removal; only a short period of time is required to remove the epoxy film and Si3N4 layer easily and cleanly.

  9. Micromachined chemical jet dispenser

    Energy Technology Data Exchange (ETDEWEB)

    Swierkowski, S.; Ciarlo, D.

    1996-05-13

    Goal is to develop a multi-channel micromachined chemical fluid jet dispenser that is applicable to prototype tests with biological samples that demonstrate its utility for molecular biology experiments. Objective is to demonstrate a new device capable of ultrasonically ejecting droplets from 10-200 {mu}m diameter capillaries that are arranged in an array that is linear or focused. The device is based on several common fabrication procedures used in MEMS (micro electro mechanical systems) technology: piezoelectric actuators, silicon, etc.

  10. Effect of ultrasonic treatment of activated carbon on capacitive and pseudocapacitive energy storage in electrochemical supercapacitors

    Directory of Open Access Journals (Sweden)

    B.Ya. Venhryn

    2013-10-01

    Full Text Available Purpose: Use of ultrasonic radiation for improving the properties of activated carbon was the aim of this paper. Increase of density of states at Fermi level was the main factor, responsible for working characteristics of electrochemical supercapacitors. Design/methodology/approach: Working parameters of supercapacitors on the base of activated carbon have been studied by means of precisional porometry, small angle X-ray scattering, cyclic voltamerometry, electrochemical impedance spectroscopy and computer simulation methods. Findings: The possibility to effect the interface between activated carbon and electrolyte by means of ultrasonic treatment in cavitation and noncavitation regimes is proved. It is shown that ultrasonic treatment in noncavitation regimes causes the significant increase of density of states at Fermi level that results in better farad-volt dependences. Research limitations/implications: This research is a complete and accomplished work. Practical implications: Modification of electric double layer by meanans in ultrasonic treatment, proposed in this work, could be regarded as effective way to obtaine the advanced electrode materials in devices of energy generation and storage. Originality/value: This work is important for physics, material science and chemistry because it is related with new possibilities to change the mobility of charge carries in electric double layer by means of ultrasonic irradiation.

  11. Passive ultrasonics using sub-Nyquist sampling of high-frequency thermal-mechanical noise.

    Science.gov (United States)

    Sabra, Karim G; Romberg, Justin; Lani, Shane; Degertekin, F Levent

    2014-06-01

    Monolithic integration of capacitive micromachined ultrasonic transducer arrays with low noise complementary metal oxide semiconductor electronics minimizes interconnect parasitics thus allowing the measurement of thermal-mechanical (TM) noise. This enables passive ultrasonics based on cross-correlations of diffuse TM noise to extract coherent ultrasonic waves propagating between receivers. However, synchronous recording of high-frequency TM noise puts stringent requirements on the analog to digital converter's sampling rate. To alleviate this restriction, high-frequency TM noise cross-correlations (12-25 MHz) were estimated instead using compressed measurements of TM noise which could be digitized at a sampling frequency lower than the Nyquist frequency.

  12. Effect of ultrasonic treatment of activated carbon on capacitive and pseudocapacitive energy storage in electrochemical supercapacitors

    OpenAIRE

    B.Ya. Venhryn; I.I. Grygorchak; Z.A. Stotsko; B.P. Bakhmatyuk; S.I. Mudry; Yu.O. Kulyk

    2013-01-01

    Purpose: Use of ultrasonic radiation for improving the properties of activated carbon was the aim of this paper. Increase of density of states at Fermi level was the main factor, responsible for working characteristics of electrochemical supercapacitors. Design/methodology/approach: Working parameters of supercapacitors on the base of activated carbon have been studied by means of precisional porometry, small angle X-ray scattering, cyclic voltamerometry, electrochemical im...

  13. Micro Capacitance Measuring Circuit Based on AC Bridge%基于交流电桥的动态微弱电容检测电路

    Institute of Scientific and Technical Information of China (English)

    廉德钦; 何常德; 苗静; 杜春晖; 宛克敬; 薛晨阳

    2012-01-01

    基于MEMS技术研制的微电容超声传感器,在超声波作用下其有效电容的变化量仅为飞法级,且变化速度非常快,检测很困难.本文提出的半桥式交流电容检测电路能把快速变化的电容信号转换为电压信号,并加载到高频正弦激励信号中,再通过放大、解调、滤波得出电容变化量.该电路能很好地抑制寄生电容的影响,有良好的线性和稳定性,在200kHz的超声波作用下灵敏度可以达到2.8mV/fF,基本满足对超声传感器电容变化量的检测.%The Capacitive Micromachined Ultrasonic Transducers based on MEMS technology has developed.Under the action of ultrasound,the change of its effective capacitance is only fF-level and changes very fast,so measuring is very difficult.The half AC bridge capacitance detection circuit presented in this paper can convert the rapidly changing capacitance signal into voltage signal,and load the voltage signal into high-frequency sinusoidal excitation signal,then obtain capacitance variation through amplification,demodulation and filtering.The circuit effectively inhibits the influence of stray capacitance,and the linearity and stability of the circuit are good.The sensitivity can achieve 2.8mV7fF with 200kHz ultrasonic wave,and basically meet the needs of the micro capacitance change detection of the Capacitive Micromachined Ultrasonic Transducers.

  14. The effect of ultrasonic and HNO3 treatment of activated carbon from fruit stones on capacitive and pseudocapacitive energy storage in electrochemical supercapacitors.

    Science.gov (United States)

    Venhryn, B Ya; Stotsko, Z A; Grygorchak, I I; Bakhmatyuk, B P; Mudry, S I

    2013-09-01

    The effect of ultrasonic treatment and modification with nitric acid of activated carbon obtained from fruit stones, on the parameters of electric double-layer (EDL) as well as on farad-volt characteristics of its boundary with electrolyte 7.6 m KОН, 4 m KI and 2 m ZnI2 aqueous solutions has been studied by means of precision porometry, cyclic voltamperometry, electrochemical impedance spectroscopy and computer simulation methods. It is shown that HNO3 treatment results in an increase of the electrostatic capacitance up to 202 F/g in 7.6 m KОН-solution as well as pseudocapacitance up to 1250 F/g in 4 m KI. This increase is supposed to be related both with hydrophilicity and with an increase of the density of states on Fermi level. The ultrasonic treatment enables one to significantly increase (more than 200 times) the density of states on Fermi level which in turn causes both quantitative and qualitative changes in farad-volt dependences. A hybrid supercapacitor with specific capacitance of 1100 F/g and specific energy of 49 Wh/kg per active mass of two electrodes was developed. PMID:23541908

  15. 微机械加工硅电容式加速度传感器%A silicon capacitive acceleration sensor made in micromachining technology

    Institute of Scientific and Technical Information of China (English)

    李跃进; 杨银堂; 朱作云; 马晓华; 陈锦杜

    2001-01-01

    The fundamental principle and fabricating process of a silicon capacitive accelerometer are described. The sensing element consists of a differential capacitor which is formed by a movable mass and two electrodes situated on anodically bonded glass plates. The application of a standard bipolar process allows the movable mass to be realized by anisotropic wet etching.The non-linearity of 10-4 magnitude is reached under a range of 20 gn.%介绍了硅电容式加速度传感器的工作原理和制作过程。传感器的敏感元件为一个差分电容器,它是由活动质量块与两个玻璃极板通过阳极键合形成。活动质量块用标准的双极工艺和各向异性腐蚀工艺制作。该传感器的量程为20?gn,线性度为10-4量级。

  16. Micromachined Silicon Cantilever Magnetometry.

    Science.gov (United States)

    Chaparala, M. V.

    1998-03-01

    Magnetic torque measurements give us a simple and attractive method for characterizing the anisotropic properties of magnetic materials. Silicon torque and force magnetometers have many advantages over traditional torsion fiber torque magnetometers. We have fabricated micromachined silicon torque and force magnetometers employing both capacitive(``Capacitance platform magnetometer for thin film and small crystal superconductor studies'', M. Chaparala et al.), AIP Conf. Proc. (USA), AIP Conference Proceedings, no.273, p. 407 1993. and strain dependent FET detection(``Strain Dependent Characterstics of Silicon MOSFETs and their Applications'', M. Chaparala et al.), ISDRS Conf. Proc. 1997. schemes which realize some of these gains. We will present the pros and cons of each of the different detection schemes and the associated design constraints. We have developed a feedback scheme which enables null detection thus preserving the integrity of the sample orientation. We will present a method of separating out the torque and force terms in the measured signals and will discuss the errors associated with each of the designs. Finally, we present the static magnetic torque measurements on various materials with these devices, including equilibrium properties on sub microgram specimens of superconductors, and dHvA measurements near H_c2. We will also discuss their usefulness in pulsed magnetic fields(``Cantilever magnetometry in pulsed magnetic fields", M. J. Naughton et al.), Rev. of Sci. Instrum., vol.68, p. 4061 1997..

  17. Micromachined pressure sensors: Review and recent developments

    Energy Technology Data Exchange (ETDEWEB)

    Eaton, W.P.; Smith, J.H. [Sandia National Labs., Albuquerque, NM (United States). Intelligent Micromachines Dept.

    1997-03-01

    Since the discovery of piezoresistivity in silicon in the mid 1950s, silicon-based pressure sensors have been widely produced. Micromachining technology has greatly benefited from the success of the integrated circuits industry, burrowing materials, processes, and toolsets. Because of this, microelectromechanical systems (MEMS) are now poised to capture large segments of existing sensor markets and to catalyze the development of new markets. Given the emerging importance of MEMS, it is instructive to review the history of micromachined pressure sensors, and to examine new developments in the field. Pressure sensors will be the focus of this paper, starting from metal diaphragm sensors with bonded silicon strain gauges, and moving to present developments of surface-micromachined, optical, resonant, and smart pressure sensors. Considerations for diaphragm design will be discussed in detail, as well as additional considerations for capacitive and piezoresistive devices.

  18. Technology trends in high temperature pressure transducers: The impact of micromachining

    Science.gov (United States)

    Mallon, Joseph R., Jr.

    1992-01-01

    This paper discusses the implications of micromachining technology on the development of high temperature pressure transducers. The introduction puts forth the thesis that micromachining will be the technology of choice for the next generation of extended temperature range pressure transducers. The term micromachining is defined, the technology is discussed and examples are presented. Several technologies for high temperature pressure transducers are discussed, including silicon on insulator, capacitive, optical, and vibrating element. Specific conclusions are presented along with recommendations for development of the technology.

  19. Micro-machined resonator oscillator

    Science.gov (United States)

    Koehler, Dale R.; Sniegowski, Jeffry J.; Bivens, Hugh M.; Wessendorf, Kurt O.

    1994-01-01

    A micro-miniature resonator-oscillator is disclosed. Due to the miniaturization of the resonator-oscillator, oscillation frequencies of one MHz and higher are utilized. A thickness-mode quartz resonator housed in a micro-machined silicon package and operated as a "telemetered sensor beacon" that is, a digital, self-powered, remote, parameter measuring-transmitter in the FM-band. The resonator design uses trapped energy principles and temperature dependence methodology through crystal orientation control, with operation in the 20-100 MHz range. High volume batch-processing manufacturing is utilized, with package and resonator assembly at the wafer level. Unique design features include squeeze-film damping for robust vibration and shock performance, capacitive coupling through micro-machined diaphragms allowing resonator excitation at the package exterior, circuit integration and extremely small (0.1 in. square) dimensioning. A family of micro-miniature sensor beacons is also disclosed with widespread applications as bio-medical sensors, vehicle status monitors and high-volume animal identification and health sensors. The sensor family allows measurement of temperatures, chemicals, acceleration and pressure. A microphone and clock realization is also available.

  20. A silicon MEMS structure for characterization of femto-farad-level capacitive sensors with lock-in architecture

    OpenAIRE

    Wei, J; Chen, Z.L.; Liu, Z. W.; Sarro, P. M.

    2010-01-01

    This paper presents a silicon MEMS capacitive structure to investigate a test methodology for fF-level capacitive sensors’ measurement. The device mimics a capacitive sensor with a changing intermediate layer between the electrodes. A single mask bulk micromachining process is used to fabricate the device, which has a nominal capacitance of 1.2 fF. A high performance measurement setup based on lock-in principle is developed to detect the capacitance variation. The maximum capacitance variatio...

  1. Micromachined Ultrasonic Transducers for 3-D Imaging

    DEFF Research Database (Denmark)

    Christiansen, Thomas Lehrmann

    Real-time ultrasound imaging is a widely used technique in medical diagnostics. Recently, ultrasound systems offering real-time imaging in 3-D has emerged. However, the high complexity of the transducer probes and the considerable increase in data to be processed compared to conventional 2-D ultr...

  2. Micro-machining.

    Science.gov (United States)

    Brinksmeier, Ekkard; Preuss, Werner

    2012-08-28

    Manipulating bulk material at the atomic level is considered to be the domain of physics, chemistry and nanotechnology. However, precision engineering, especially micro-machining, has become a powerful tool for controlling the surface properties and sub-surface integrity of the optical, electronic and mechanical functional parts in a regime where continuum mechanics is left behind and the quantum nature of matter comes into play. The surprising subtlety of micro-machining results from the extraordinary precision of tools, machines and controls expanding into the nanometre range-a hundred times more precise than the wavelength of light. In this paper, we will outline the development of precision engineering, highlight modern achievements of ultra-precision machining and discuss the necessity of a deeper physical understanding of micro-machining.

  3. Micromachined Artificial Haircell

    Science.gov (United States)

    Liu, Chang (Inventor); Engel, Jonathan (Inventor); Chen, Nannan (Inventor); Chen, Jack (Inventor)

    2010-01-01

    A micromachined artificial sensor comprises a support coupled to and movable with respect to a substrate. A polymer, high-aspect ratio cilia-like structure is disposed on and extends out-of-plane from the support. A strain detector is disposed with respect to the support to detect movement of the support.

  4. A silicon MEMS structure for characterization of femto-farad-level capacitive sensors with lock-in architecture

    NARCIS (Netherlands)

    Wei, J.; Chen, Z.L.; Liu, Z.W.; Sarro, P.M.

    2010-01-01

    This paper presents a silicon MEMS capacitive structure to investigate a test methodology for fF-level capacitive sensors’ measurement. The device mimics a capacitive sensor with a changing intermediate layer between the electrodes. A single mask bulk micromachining process is used to fabricate the

  5. Feasibility of MR-temperature mapping of ultrasonic heating from a CMUT.

    Science.gov (United States)

    Wong, Serena H; Watkins, Ronald D; Kupnik, Mario; Pauly, Kim Butts; Khuri-Yakub, Butrus T

    2008-04-01

    In the last decade, high intensity focused ultrasound (HIFU) has gained popularity as a minimally invasive and noninvasive therapeutic tool for treatment of cancers, arrhythmias, and other medical conditions. HIFU therapy is often guided by magnetic resonance imaging (MRI), which provides anatomical images for therapeutic device placement, temperature maps for treatment guidance, and postoperative evaluation of the region of interest. While piezoelectric transducers are dominantly used for MR-guided HIFU, capacitive micromachined ultrasonic transducers (CMUTs) show competitive advantages, such as ease of fabrication, integration with electronics, improved efficiency, and reduction of self-heating. In this paper, we will show our first results of an unfocused CMUT transducer monitored by MR-temperature maps. This 2.51 mm by 2.32 mm, unfocused CMUT heated a HIFU phantom by 14 degrees C in 2.5 min. This temperature rise was successfully monitored by MR thermometry in a 3.0 T General Electric scanner. PMID:18467225

  6. Trends in laser micromachining

    Science.gov (United States)

    Gaebler, Frank; van Nunen, Joris; Held, Andrew

    2016-03-01

    Laser Micromachining is well established in industry. Depending on the application lasers with pulse length from μseconds to femtoseconds and wavelengths from 1064nm and its harmonics up to 5μm or 10.6μm are used. Ultrafast laser machining using pulses with pico or femtosecond duration pulses is gaining traction, as it offers very precise processing of materials with low thermal impact. Large-scale industrial ultrafast laser applications show that the market can be divided into various sub segments. One set of applications demand low power around 10W, compact footprint and are extremely sensitive to the laser price whilst still demanding 10ps or shorter laser pulses. A second set of applications are very power hungry and only become economically feasible for large scale deployments at power levels in the 100+W class. There is also a growing demand for applications requiring fs-laser pulses. In our presentation we would like to describe these sub segments by using selected applications from the automotive and electronics industry e.g. drilling of gas/diesel injection nozzles, dicing of LED substrates. We close the presentation with an outlook to micromachining applications e.g. glass cutting and foil processing with unique new CO lasers emitting 5μm laser wavelength.

  7. Micromachined electrode array

    Energy Technology Data Exchange (ETDEWEB)

    Okandan, Murat (Edgewood, NM); Wessendorf, Kurt O. (Albuquerque, NM)

    2007-12-11

    An electrode array is disclosed which has applications for neural stimulation and sensing. The electrode array, in certain embodiments, can include a plurality of electrodes each of which is flexibly attached to a common substrate using a plurality of springs to allow the electrodes to move independently. In other embodiments of the electrode array, the electrodes can be fixed to the substrate. The electrode array can be formed from a combination of bulk and surface micromachining, and can include electrode tips having an electroplated metal (e.g. platinum, iridium, gold or titanium) or a metal oxide (e.g. iridium oxide) for biocompatibility. The electrode array can be used to form a part of a neural prosthesis, and is particularly well adapted for use in an implantable retinal prosthesis.

  8. MEMS Capacitive Pressure Sensors: A Review on Recent Development and Prospective

    Directory of Open Access Journals (Sweden)

    Eswaran P

    2013-06-01

    Full Text Available Recently MEMS Capacitive Pressure Sensor gains more advantage over micromachined piezoresistive pressure sensor due to high sensitivity, low power consumption, free from temperature effects, IC compatibility, etc,. The spectrum of capacitive pressure sensor application is increasing, hence it is essential to review the path of technological development and further prospective of micromachinedcapacitive pressure sensor. This paper focuses on the review of various types of capacitive pressure sensor principle, MEMS materials used in fabrication, procedures adopted in microfabrication for silicon and polymer material diaphragm, bonding and packaging techniques used. Selected result on capacitive sensitivity, effect of temperature on capacitive sensitivity was also presented. Finally, the development of smart sensor was discussed.

  9. Micromachined capacitive pressure sensor with signal conditioning electronics

    OpenAIRE

    Fragiacomo, Giulio; Hansen, Ole; Thomsen, Erik Vilain; Kjærgaard, Claus; Christensen, Carsten

    2012-01-01

    Dette projekt vedrører kapacitive mikrotryksensorer til barske omgivelser og dertil relaterede elektroniske grænseflader. Mikroeletromekaniske systemer (MEMS) er ofte benyttede, frem for makroskopiske sensorsystmer, inden for flere forskellige felter og er i mange tilfælde den eneste løsningsmodel, f.eks. i de tilfælde hvor størrelsen af sensorelementet er en begrænsende faktor. Derudover kan brugen af MEMS reducere omkostninger og energiforbrug væsentligt, hvorfor MEMS ofte anvendes til forb...

  10. Micromachining with DUV lasers

    Science.gov (United States)

    Toenshoff, Hans K.; Kappel, Heiner; Heekenjann, Peter B.

    1997-04-01

    In many industrial branches a continuous scaling down of parts and products is observed. For example in the fields of micro-mechanics new sensors and actuators can be produced which offer the possibility of making self acting micro- systems. Other micro-components for medicine, chemistry or optics allow minimal invasive surgery and inspection. In every case conventional fabrication technologies such as turning and milling have to be carefully investigated: their appropriateness for the production of micro-parts is not always guaranteed. On the other hand new technologies such as the LIGA-process (German acronym for lithography, galvano forming and plastic molding process) open new ways to inexpensive mass-production. The following paper describes the potential of DUV-lasers (laser wavelength: lambda equals 200 - 280 nm) for micro-machining specific applications. Using excimer-lasers the machining of ceramics, glass and polymer materials is presented. The excellent beam properties of a self developed quadrupled Nd:YAG-laser are used for the repair of photolithographic masks. The mask repair using ablation and deposition of chromium on glass substrate is described.

  11. Micromachined dual input axis rate gyroscope

    Science.gov (United States)

    Juneau, Thor Nelson

    The need for inexpensive yet reliable angular rate sensors in fields ranging from automotive to consumer electronics has motivated prolific micromachined rate gyroscope research. The vast majority of research has focused on single input axis rate gyroscopes based upon either translational resonance, such as tuning forks, or structural mode resonance, such as vibrating rings. However, this work presents a novel, contrasting approach based on angular resonance of a rotating rigid rotor suspended by torsional springs. The inherent symmetry of the circular design allows angular rate measurement about two axes simultaneously, hence the name micromachined dual-axis rate gyroscope. The underlying theory of operation, mechanical structure design optimization, electrical interface circuitry, and signal processing are described in detail. Several operational versions were fabricated using two different fully integrated surface micromachining processes as proof of concept. The heart of the dual-axis rate gyroscope is a ˜2 mum thick polysilicon disk or rotor suspended above the substrate by a four beam suspension. When this rotor in driven into angular oscillation about the axis perpendicular to the substrate, a rotation rate about the two axes parallel to the substrate invokes an out of plane rotor tilting motion due to Coriolis acceleration. This tilting motion is capacitively measured and on board integrated signal processing provides two output voltages proportional to angular rate input about the two axes parallel to the substrate. The design process begins with the derivation of gyroscopic dynamics. The equations suggest that tuning sense mode frequencies to the drive oscillation frequency can vastly increase mechanical sensitivity. Hence the supporting four beam suspension is designed such that electrostatic tuning can match modes despite process variations. The electrostatic tuning range is limited only by rotor collapse to the substrate when tuning-voltage induced

  12. Development of ultrasonic imaging transducer%超声成像换能器技术的发展

    Institute of Scientific and Technical Information of China (English)

    李文龙; 菅喜岐

    2008-01-01

    作为超声波发射和回波接收器件的换能器,始终是医学超声成像系统中最为关键的声学部件.随着超声成像换能器技术的不断发展使超声图像更清晰,更直观.主要论述新型压电复合材料换能器、压电单晶材料换能器、宽频带换能器、三维成像换能器和电容式微加工换能器的技术发展及其展望.%Transducer,which acts as both ultrasound emitter and echo receiver,is the most important acoustics part in medical ultrasonic imaging system.The development of ultrasonic imaging technology makes ultrasound image clearer and more intuitionistic.This paper mainly introduces the technical development and the prospects of piezocomposite transducer,piezoelectric single crystal transducer,wide-band transducer,3D imaging transducer and capacitive micromachined ultrasonic transducer(cMUT).

  13. Analysis of small deflection touch mode behavior in capacitive pressure sensors

    DEFF Research Database (Denmark)

    Fragiacomo, Giulio; Ansbæk, Thor; Pedersen, Thomas;

    2010-01-01

    mode), touch point pressure and parasitic capacitance. Therefore, the desired device can be designed without using finite element modeling (FEM). This reduces the effort needed to design a micromachined TMCPS. Finally, the model has been compared with a micromachined TMCPS showing an excellent...... such that geometrical scalings are revealed. We show that, in the case of linear elastic behavior, a simple analytical model can be found for a touch mode capacitive pressure sensor (TMCPS). With this model it is possible to readily evaluate the main features of a TMCPS such as: sensitivity (both in normal and touch...

  14. Design, Fabrication and Levitation Experiments of a Micromachined Electrostatically Suspended Six-Axis Accelerometer

    OpenAIRE

    Weiping Zhang; Xiaosheng Wu; Wenyuan Chen; Wu Liu; Feng Cui

    2011-01-01

    A micromachined electrostatically suspended six-axis accelerometer, with a square plate as proof mass housed by a top stator and bottom stator, is presented. The device structure and related techniques concerning its operating principles, such as calculation of capacitances and electrostatic forces/moments, detection and levitation control of the proof mass, acceleration measurement, and structural parameters design, are described. Hybrid MEMS manufacturing techniques, including surface micro...

  15. Super-resolution ultrasonic imaging of stiffness variations on a microscale active metasurface

    Science.gov (United States)

    Lani, Shane; Sabra, Karim G.; Degertekin, F. Levent

    2016-02-01

    Surface acoustic waves propagating over an immersed membrane metasurface, such as an array of capacitive micromachined ultrasonic transducers, can be leveraged to achieve subwavelength focusing and imaging. This is demonstrated numerically and experimentally utilizing a time reversal method on a 2D membrane array at MHz frequencies. The focusing region is a dense metasurface of CMUT membranes with 6.5 MHz resonance frequency that supports a wave field that is evanescent normal to the metasurface and capable of super-resolution along the metasurface. Electrostatically actuated membranes, spatially separate from the focusing region, are used to generate the focused wave field. Subwavelength focusing is demonstrated on the metasurface with a resolution of a single membrane resonator or λ/5. Similar techniques allow for super-resolution imaging of a subwavelength defect or change in the medium of the focusing region. A subwavelength sized imaging target, obtained by altering the stiffness of a single membrane by 1.2%, is shown to be properly imaged with subwavelength resolution. These results pave the way for practical implementation of ultrasonic super-resolution imaging systems using metasurfaces.

  16. Review of polymer MEMS micromachining

    Science.gov (United States)

    Kim, Brian J.; Meng, Ellis

    2016-01-01

    The development of polymer micromachining technologies that complement traditional silicon approaches has enabled the broadening of microelectromechanical systems (MEMS) applications. Polymeric materials feature a diverse set of properties not present in traditional microfabrication materials. The investigation and development of these materials have opened the door to alternative and potentially more cost effective manufacturing options to produce highly flexible structures and substrates with tailorable bulk and surface properties. As a broad review of the progress of polymers within MEMS, major and recent developments in polymer micromachining are presented here, including deposition, removal, and release techniques for three widely used MEMS polymer materials, namely SU-8, polyimide, and Parylene C. The application of these techniques to create devices having flexible substrates and novel polymer structural elements for biomedical MEMS (bioMEMS) is also reviewed.

  17. Distance effects in electrochemical micromachining

    Science.gov (United States)

    Xu, Lizhong; Pan, Yue; Zhao, Chuanjun

    2016-09-01

    Considering exponential dependence of currents on double-layer voltage and the feedback effect of the electrolyte resistance, a distance effect in electrochemical micromachining is found, namely that both time constant and double-layer voltage depend on the separation of electrodes. The double-layer voltage is the real voltage used in processing. Under DC voltage, the apparent voltages between two electrodes are constant for different separations, but the real voltages change with the separations. Small separations exert substantial effects on the real voltages. Accordingly, a DC-voltage small-separation electrochemical micromachining technique was proposed. The double-layer voltage drops sharply as the small separation increases. Thus, the electrochemical reactions are confined to electrode regions in very close proximity even under DC voltage. The machining precision can be significantly enhanced by reducing the voltage and separation between electrodes. With this technique, the machining of conducting materials with submicrometre precision was achieved.

  18. Micromachined magnetohydrodynamic actuators and sensors

    Science.gov (United States)

    Lee, Abraham P.; Lemoff, Asuncion V.

    2000-01-01

    A magnetohydrodynamic (MHD) micropump and microsensor which utilizes micromachining to integrate the electrodes with microchannels and includes a magnet for producing magnetic fields perpendicular to both the electrical current direction and the fluid flow direction. The magnet can also be micromachined and integrated with the micropump using existing technology. The MHD micropump, for example, can generate continuous, reversible flow, with readily controllable flow rates. The flow can be reversed by either reversing the electrical current flow or reversing the magnetic field. By mismatching the electrodes, a swirling vortex flow can be generated for potential mixing applications. No moving parts are necessary and the dead volume is minimal. The micropumps can be placed at any position in a fluidic circuit and a combination of micropumps can generate fluidic plugs and valves.

  19. Review of polymer MEMS micromachining

    International Nuclear Information System (INIS)

    The development of polymer micromachining technologies that complement traditional silicon approaches has enabled the broadening of microelectromechanical systems (MEMS) applications. Polymeric materials feature a diverse set of properties not present in traditional microfabrication materials. The investigation and development of these materials have opened the door to alternative and potentially more cost effective manufacturing options to produce highly flexible structures and substrates with tailorable bulk and surface properties. As a broad review of the progress of polymers within MEMS, major and recent developments in polymer micromachining are presented here, including deposition, removal, and release techniques for three widely used MEMS polymer materials, namely SU-8, polyimide, and Parylene C. The application of these techniques to create devices having flexible substrates and novel polymer structural elements for biomedical MEMS (bioMEMS) is also reviewed. (topical review)

  20. A Surface Micromachined CMOS MEMS Humidity Sensor

    OpenAIRE

    Jian-Qiu Huang; Fei Li; Min Zhao; Kai Wang

    2015-01-01

    This paper reports a CMOS MEMS (complementary metal oxide semiconductor micro electromechanical system) piezoresistive humidity sensor fabricated by a surface micromachining process. Both pre-CMOS and post-CMOS technologies were used to fabricate the piezoresistive humidity sensor. Compared with a bulk micromachined humidity sensor, the machining precision and the sizes of the surface micromachined humidity sensor were both improved. The package and test systems of the sensor were designed. A...

  1. Laser Micromachining of Glass, Silicon, and Ceramics

    OpenAIRE

    L. Rihakova; Chmelickova, H.

    2015-01-01

    A brief review is focused on laser micromachining of materials. Micromachining of materials is highly widespread method used in many industries, including semiconductors, electronic, medical, and automotive industries, communication, and aerospace. This method is a promising tool for material processing with micron and submicron resolution. In this paper micromachining of glass, silicon, and ceramics is considered. Interaction of these materials with laser radiation and recent research held o...

  2. Fiber Optic Broadband Ultrasonic Probe for Virtual Biopsy: Technological Solutions

    OpenAIRE

    Biagi, E.; Cerbai, S.; Masotti, L.; L. Belsito; A. RONCAGLIA; Masetti, G.; N. Speciale

    2010-01-01

    An ultrasonic probe was developed by using, in conjunction, optoacoustic and acousto-optic devices based on fiber optic technology. The intrinsic high frequency and wide bandwidth associated both to the opto-acoustic source and to the acousto-optic receiving element could open a way towards a “virtual biopsy” of biological tissue. A Micro-Opto-Mechanical-System (MOMS) approach is proposed to realize the broadband ultrasonic probe on micromachined silicon frames suited to be mounted on the tip...

  3. Efficient Sonochemistry through Microbubbles Generated with Micromachined Surfaces

    CERN Document Server

    Rivas, David Fernandez; Zijlstra, Aaldert G; Lohse, Detlef; Gardeniers, Han J G E; 10.1002/anie.201005533

    2012-01-01

    Sonochemical reactors are used in water treatment, the synthesis of fine chemicals, pharmaceutics and others. The low efficiency of sonoreactors have prevented its massive usage at industrial scales. Controlling the appearance of bubbles in place and time is the most limiting factor. A novel type of sonochemical reactor was designed making use of micro-fabrication techniques to control the nucleation sites of micro-bubbles. The efficiency was increased first by locating the nucleation sites in the most active region of a micro-chamber; additionally the desired chemical effect was significantly higher at the same powers than when not controlled. Silicon substrates were micromachined with "artificial nucleation sites" or pits, and placed at the bottom of the micro-chamber. The pits entrap gas which, upon ultrasonic excitation, sheds off a stream of microbubbles. The gas content of the pits is not depleted but is replenished by diffusion and the emission of microbubbles can continue for hours.

  4. Micromachined optical fiber current sensor

    OpenAIRE

    Heredero, R. L.; Fernández de Caleya, Ramón; Guerrero, Héctor; Losantos Viñolas, Pedro; Acero, M.C.; Esteve, J.

    1999-01-01

    We describe a micromachined optical fiber current sensor. The sensing element consists of a squared silicon membrane (8 mm long and 20 μm thick) that has a cylindrical permanent magnet (NdFeB alloy, 3-mm diameter, 1.5 mm high) fixed on its central region. This structure allows the permanent magnet to vibrate in the presence of the magnetic field gradient generated by an ac. A linear relation between the electrical current and the magnet displacement was measured with white-light interferometr...

  5. A novel model for calculating the inter-electrode capacitance of wedge-strip anode

    Science.gov (United States)

    Zhao, Airong; Ni, Qiliang

    2016-04-01

    The wedge strip anode (WSA) detector has been widely used in particle detection. In this work, a novel model for calculating the inter-electrode capacitance of WSA was proposed on the basis of conformal transformations and the partial capacitance method. Based on the model, the inter-electrode capacitance within a period was calculated besides the total inter-electrode capacitance. As a result, the effects of the WSA design parameters on the inter-electrode capacitance are systematically analyzed. It is found that the inter-electrode capacitance monotonically increases with insulated gap and substrate permittivity but not with the period. In order to prove the validation of the model, two round WSAs were manufactured by employing the picosecond laser micro-machining technology. It is found that 9%-15% errors between the theoretical and experimental results can be obtained, which is better than that obtained by employing ANSYS software.

  6. 超声法合成花状 Ni(OH)2微球及其电容特性分析的实验设计%Ultrasonic synthesis of Ni(OH)2 flower-like microspheres and their capacitive performance analysis of experimental design

    Institute of Scientific and Technical Information of China (English)

    龚良玉; 康武魁; 吴锦淑; 杨洲; 冷晓; 韩德隆; 陈萍

    2014-01-01

    以氯化镍为镍盐来源,尿素为沉淀剂,采用超声法快速地合成了由纳米片组装而成的花状 Ni(OH)2微球。探讨了超声时间和功率、反应物配比等因素对 Ni(OH)2电化学性能的影响。结果表明,当超声时间为30 min,超声功率为500 W,镍盐和尿素的配比为1/4时,所得 Ni(OH)2样品的电容性能最佳,10 mA 下恒流充放电时,其放电比电容量高达1906 F/ g。%Flower-like Ni(OH)2 microspheres assembled from several dozens of nanosheets were success-fully synthesized through a rapid ultrasonic irradiation process in a very simple system composed only of water,NiCl2 and CO(NH2 )2 . The effects of the ultrasonic time and power,the reactants ratio on electro-chemical properties were discussed. The result showed that the maximum specific capacitance value of 1 906 F/ g at 10 mA could be achieved,the Ni(OH)2 flower-like microspheres obtained at ultrasonic time of 30 min,ultrasonic power of 500 W and the NiCl2 / CO(NH2 )2 ratio of 1 / 4.

  7. False capacitance of supercapacitors

    OpenAIRE

    Ragoisha, G. A.; Aniskevich, Y. M.

    2016-01-01

    Capacitance measurements from cyclic voltammetry, galvanostatic chronopotentiometry and calculation of capacitance from imaginary part of impedance are widely used in investigations of supercapacitors. The methods assume the supercapacitor is a capacitor, while real objects correspond to different equivalent electric circuits and show various contributions of non-capacitive currents to the current which is used for calculation of capacitance. Specific capacitances which are presented in F g-1...

  8. Ultrasonic Microtransport

    Science.gov (United States)

    Moroney, Richard Morgan, III

    We have observed numerous kinetic effects using ultrasonic flexural plate waves (FPWs) in 4mu -thick composite plates of low-stress silicon nitride, piezoelectric zinc oxide and aluminum. The wavelength is typically 100 mum, and the area 3 x 8 mm^2. A successful new surface micromachining fabrication process is presented here for the first time. FPWs have been used to move liquids and gasses with motion typically indicated by polysilicon blocks in air and polystyrene spheres in water; the velocity in air is 4.5 mm/s (with a zero-to-peak input of 3 V), and in water it is 100 mum/s (with an input of 7.8 V). Other observations include pumping of a liquid dye, and mixing near the FPW surface. All quantitative observations demonstrate that the kinetic effects of FPWs are proportional to the square of the wave amplitude. The amplitude for a typical device is 250 A at 9 V input; the power in a typical FPW is about 2 mW. The amplitude can be accurately measured using a laser diffraction technique. Experimental error is about +/-10%, and many of the results agree well with a simple theory to predict the FPW amplitude; extensions of the theory model the fluid loading of FPW devices, but experiment and theory disagree by about 15%. Pumping by flexural plate waves is an example of the phenomenon known as acoustic streaming. A common solution approach is the method of successive approximations, where the nonlinear equations are first linearized and solved. This "first-order" solution is then used to determine the inhomogeneous source terms in the linearized, "second -order" equations of motion. Theoretical predictions of streaming theory are in excellent agreement with experiment in the case where the FPW device contacts a half-space of fluid; predictions for flow in small channels encourage the development of integrated micropumps. Applications for microflow include thermal redistribution in integrated circuits and liquid movement in analytical instruments--particularly where

  9. ON-LINE SELF-TESTING FOR MICRO-MACHINED GYROSCOPES

    Institute of Scientific and Technical Information of China (English)

    GAISSERAlexander; GAOZhong-yu; ZHANGRong; CHENZhi-yong; ZHOUBin

    2005-01-01

    An on line self-testing for Coriolis vibratory gyroscopes (CVGs) is realized according to a digital readout electronics for capacitive sensors and micro-machined angular rate sensors. By applying some additional signals to the micro machined structure, the actual noise performance (<0.1°/s) is not worsened. The running of the primary and the secondary oscillators of CVGs is verified by self-testing. Compared with other methods, the device needs not to check the functionality. In this new approach the on-line testing is conducted at any time without disturbing the normal operational mode. Based on the approach the performance of the micro machined gyroscope can be improved and a secure availability of the functionality of the micro-machined angular rate sensor is guaranteed. Furthermore, the error signal is generated when the sensor works incorrectly.

  10. Digital Readout System for Micromachined Gyroscope and Analysis for its Demodulation Algorithm

    Institute of Scientific and Technical Information of China (English)

    ZHOU Bin; GAO Zhong-yu; CHEN Huai; ZHANG Rong; CHEN Zhi-yong

    2006-01-01

    A new digital readout system for micromachined gyroscope has been proposed to implement flexible parameter adiustment,improve the control performance of gyroscope,and make error compensation.By digitalizing the output of the gyroscope,this system uses a floatingtype digital signal processor(DSP)to process the signal demodulation and achieve the feedback conffol of the gyroscope.Therefore.the small change of capacitance in the micromachined gyroscope Can be detected.A new demodulation algorithm of least mean square demodulation(LMSD)has been developed inside DSP Simulation and measurement results show that LMSD Can improve 29%of the noise performance compared with the typical multiplication method.In air pressure.a kind ofvibration-wheel micmmachined over the 100-Hz bandwidth by using this digital readout technology.

  11. Micromachined Thermal Flow Sensors—A Review

    Directory of Open Access Journals (Sweden)

    Jonathan T. W. Kuo

    2012-07-01

    Full Text Available Microfabrication has greatly matured and proliferated in use amongst many disciplines. There has been great interest in micromachined flow sensors due to the benefits of miniaturization: low cost, small device footprint, low power consumption, greater sensitivity, integration with on-chip circuitry, etc. This paper reviews the theory of thermal flow sensing and the different configurations and operation modes available. Material properties relevant to micromachined thermal flow sensing and selection criteria are also presented. Finally, recent applications of micromachined thermal flow sensors are presented. Detailed tables of the reviewed devices are included.

  12. Micromachining process – current situation and challenges

    Directory of Open Access Journals (Sweden)

    Lalakiya Meet Rajeshkumar

    2015-01-01

    Full Text Available The rapid progress in the scientific innovations and the hunt for the renewable energy increases the urge for producing the bio electronic products, solar cells, bio batteries, nano robots, MEMS, blood less surgical tools which can be possible with the aid of the micromachining. This article helps us to understand the evolution and the challenges faced by the micromachining process. Micro machining is an enabling technology that facilitates component miniaturization and improved performance characteristics. Growing demand for less weight, high accuracy, high precision, meagre lead time, reduced batch size, less human interference are the key drivers for the micromachining than the conventional machining process.

  13. Silicon-micromachined microchannel plates

    CERN Document Server

    Beetz, C P; Steinbeck, J; Lemieux, B; Winn, D R

    2000-01-01

    Microchannel plates (MCP) fabricated from standard silicon wafer substrates using a novel silicon micromachining process, together with standard silicon photolithographic process steps, are described. The resulting SiMCP microchannels have dimensions of approx 0.5 to approx 25 mu m, with aspect ratios up to 300, and have the dimensional precision and absence of interstitial defects characteristic of photolithographic processing, compatible with positional matching to silicon electronics readouts. The open channel areal fraction and detection efficiency may exceed 90% on plates up to 300 mm in diameter. The resulting silicon substrates can be converted entirely to amorphous quartz (qMCP). The strip resistance and secondary emission are developed by controlled depositions of thin films, at temperatures up to 1200 deg. C, also compatible with high-temperature brazing, and can be essentially hydrogen, water and radionuclide-free. Novel secondary emitters and cesiated photocathodes can be high-temperature deposite...

  14. Soft micromachines with programmable motility and morphology

    Science.gov (United States)

    Huang, Hen-Wei; Sakar, Mahmut Selman; Petruska, Andrew J.; Pané, Salvador; Nelson, Bradley J.

    2016-07-01

    Nature provides a wide range of inspiration for building mobile micromachines that can navigate through confined heterogenous environments and perform minimally invasive environmental and biomedical operations. For example, microstructures fabricated in the form of bacterial or eukaryotic flagella can act as artificial microswimmers. Due to limitations in their design and material properties, these simple micromachines lack multifunctionality, effective addressability and manoeuvrability in complex environments. Here we develop an origami-inspired rapid prototyping process for building self-folding, magnetically powered micromachines with complex body plans, reconfigurable shape and controllable motility. Selective reprogramming of the mechanical design and magnetic anisotropy of body parts dynamically modulates the swimming characteristics of the micromachines. We find that tail and body morphologies together determine swimming efficiency and, unlike for rigid swimmers, the choice of magnetic field can subtly change the motility of soft microswimmers.

  15. Realization of CMOS compatible micromachined chemical sensors

    OpenAIRE

    Demirci, Tuğba; Demirci, Tugba

    2002-01-01

    The chemical sensors are fabricated using IC manufacturing technologies, providing a smaller size and lower weight, lower power consumption, and lower cost due to the automated and batch production. During the last two decades, largely two-dimensional Integrated Circuit (IC) fabrication technology has been extended into the third dimension by micromachining technologies [1]. Micromachining has been used to produce a growing variety of micromechanical structures, including automotive pressure ...

  16. Micromachining of electret materials, advantages and possibilities

    OpenAIRE

    Voorthuyzen, J.A.; Bergveld, P.

    1988-01-01

    A process is described for the micromachining of organic electret materials like Teflon FEP (fluorinated ethylene propylene). The authors have used photolithography and plasma etching, by which electrets can be etched selectively. The advantages of micromachining electrets in such a way are numerous. Miniature sensors like microphones and pressure sensors, containing local areas using Teflon, have been realized in the authors' laboratories. The process can also be used for electret research. ...

  17. Flexible capacitive behavior of hybrid carbon materials prepared from graphene sheets

    Science.gov (United States)

    Ding, Y.-H.; Xie, W.; Zhang, P.; Jiang, Y.

    2016-06-01

    High frequency ultrasonication was employed to reduce the aggregation of graphene by constructing hybrid carbon materials (HCMs), which are endowed with a large electrochemical reaction area and high energy density. HCMs exhibited a specific capacitance of 168.5 F · g‑1 with ∼100% capacitance retention over 500 cycles. Flexible supercapacitors fabricated from HCMs also showed an excellent capacitive behavior even under tough conditions. These outstanding electrochemical properties were ascribed to the increased specific surface area and open structure of HCMs.

  18. Ultrasonic testing

    Energy Technology Data Exchange (ETDEWEB)

    Song, Sung Jin [Sungkwunkwan Univ., Seoul (Korea, Republic of); Jeong, Hyun Jo [Wonkwang Univ., Iksan (Korea, Republic of)

    2004-02-15

    For the proper performance of ultrasonic testing of steel welded joints, and anisotropic material it is necessary to have sound understanding on the underlying physics. To provide such an understanding, it is beneficial to have simulation tools for ultrasonic testing. In order to address such a need, we develop effective approaches to simulate angle beam ultrasonic testing with a personal computer. The simulation is performed using ultrasonic measurement models based on the computationally efficient multi-Gaussian beams. This reach will describe the developed ultrasonic testing models together with the experimental verification of their accuracy.

  19. Demonstration of superconducting micromachined cavities

    Science.gov (United States)

    Brecht, T.; Reagor, M.; Chu, Y.; Pfaff, W.; Wang, C.; Frunzio, L.; Devoret, M. H.; Schoelkopf, R. J.

    2015-11-01

    Superconducting enclosures will be key components of scalable quantum computing devices based on circuit quantum electrodynamics. Within a densely integrated device, they can protect qubits from noise and serve as quantum memory units. Whether constructed by machining bulk pieces of metal or microfabricating wafers, 3D enclosures are typically assembled from two or more parts. The resulting seams potentially dissipate crossing currents and limit performance. In this letter, we present measured quality factors of superconducting cavity resonators of several materials, dimensions, and seam locations. We observe that superconducting indium can be a low-loss RF conductor and form low-loss seams. Leveraging this, we create a superconducting micromachined resonator with indium that has a quality factor of two million, despite a greatly reduced mode volume. Inter-layer coupling to this type of resonator is achieved by an aperture located under a planar transmission line. The described techniques demonstrate a proof-of-principle for multilayer microwave integrated quantum circuits for scalable quantum computing.

  20. Demonstration of superconducting micromachined cavities

    Energy Technology Data Exchange (ETDEWEB)

    Brecht, T., E-mail: teresa.brecht@yale.edu; Reagor, M.; Chu, Y.; Pfaff, W.; Wang, C.; Frunzio, L.; Devoret, M. H.; Schoelkopf, R. J. [Department of Applied Physics, Yale University, New Haven, Connecticut 06511 (United States)

    2015-11-09

    Superconducting enclosures will be key components of scalable quantum computing devices based on circuit quantum electrodynamics. Within a densely integrated device, they can protect qubits from noise and serve as quantum memory units. Whether constructed by machining bulk pieces of metal or microfabricating wafers, 3D enclosures are typically assembled from two or more parts. The resulting seams potentially dissipate crossing currents and limit performance. In this letter, we present measured quality factors of superconducting cavity resonators of several materials, dimensions, and seam locations. We observe that superconducting indium can be a low-loss RF conductor and form low-loss seams. Leveraging this, we create a superconducting micromachined resonator with indium that has a quality factor of two million, despite a greatly reduced mode volume. Inter-layer coupling to this type of resonator is achieved by an aperture located under a planar transmission line. The described techniques demonstrate a proof-of-principle for multilayer microwave integrated quantum circuits for scalable quantum computing.

  1. Micromachining for laser fusion pellet

    International Nuclear Information System (INIS)

    In laser nuclear fusion, the fusion reaction is induced by irradiating powerful laser beam on the pellets filled with fuel, and compressing and heating the fuel by implosion. At this time, in order to compress it up to high density, it is very important to compress as the spherical symmetry is maintained. The uniformity of the sphericity and wall thickness is required to be more than 98 %. Besides, in order to heighten the efficiency, it is necessary to limit the temperature of main fuel low, to ignite with hot sparks at the center, and to burn remaining fuel with the alpha particles which are generated by the nuclear fusion reaction there. For this purpose, various target structures have been proposed. The cryogenic target for ablative compression, the double shell target and the cannonball target are shown. In order to produce these targets, the development of the fuel spheres which have high uniformity and good sphericity in the required size, the development of the coating process with good surface finish which can do uniform coating at the rate of about 10 μm/h, the development of micromachining technology, the development of cryogenic technology and so on are necessary. Also the levitation of pellets by magnetic suspension method is explained. (K.I.)

  2. Physics-based signal processing algorithms for micromachined cantilever arrays

    Science.gov (United States)

    Candy, James V; Clague, David S; Lee, Christopher L; Rudd, Robert E; Burnham, Alan K; Tringe, Joseph W

    2013-11-19

    A method of using physics-based signal processing algorithms for micromachined cantilever arrays. The methods utilize deflection of a micromachined cantilever that represents the chemical, biological, or physical element being detected. One embodiment of the method comprises the steps of modeling the deflection of the micromachined cantilever producing a deflection model, sensing the deflection of the micromachined cantilever and producing a signal representing the deflection, and comparing the signal representing the deflection with the deflection model.

  3. Silicon Micromachining for Terahertz Component Development

    Science.gov (United States)

    Chattopadhyay, Goutam; Reck, Theodore J.; Jung-Kubiak, Cecile; Siles, Jose V.; Lee, Choonsup; Lin, Robert; Mehdi, Imran

    2013-01-01

    Waveguide component technology at terahertz frequencies has come of age in recent years. Essential components such as ortho-mode transducers (OMT), quadrature hybrids, filters, and others for high performance system development were either impossible to build or too difficult to fabricate with traditional machining techniques. With micromachining of silicon wafers coated with sputtered gold it is now possible to fabricate and test these waveguide components. Using a highly optimized Deep Reactive Ion Etching (DRIE) process, we are now able to fabricate silicon micromachined waveguide structures working beyond 1 THz. In this paper, we describe in detail our approach of design, fabrication, and measurement of silicon micromachined waveguide components and report the results of a 1 THz canonical E-plane filter.

  4. Optical measurement of micromachine engine performance

    Energy Technology Data Exchange (ETDEWEB)

    Holswade, S.C.; Dickey, F.M.

    1997-08-01

    Understanding the mechanisms that impact the performance of Microelectromechanical Systems (MEMS) is essential to the development of optimized designs and drive signals, as well as the qualification of devices for commercial applications. Silicon micromachines include engines that consist of orthogonally oriented linear comb drive actuators mechanically connected to a rotating gear. These gears are as small as 50 {mu}m in diameter and can be driven at rotation rates exceeding 300,000 rpm. Optical techniques offer the potential for measuring long term statistical performance data and transient responses needed to optimize designs and manufacturing techniques. The authors describe the development of Micromachine Optical Probe (MOP) technology for the evaluation of micromachine performance. The MOP approach is based on the detection of optical signals scattered by the gear teeth or other physical structures. They present experimental results for a prototype system designed to measure engine parameters as well as long term performance data.

  5. Fundamental mechanisms of micromachine reliability

    Energy Technology Data Exchange (ETDEWEB)

    DE BOER,MAARTEN P.; SNIEGOWSKI,JEFFRY J.; KNAPP,JAMES A.; REDMOND,JAMES M.; MICHALSKE,TERRY A.; MAYER,THOMAS K.

    2000-01-01

    Due to extreme surface to volume ratios, adhesion and friction are critical properties for reliability of Microelectromechanical Systems (MEMS), but are not well understood. In this LDRD the authors established test structures, metrology and numerical modeling to conduct studies on adhesion and friction in MEMS. They then concentrated on measuring the effect of environment on MEMS adhesion. Polycrystalline silicon (polysilicon) is the primary material of interest in MEMS because of its integrated circuit process compatibility, low stress, high strength and conformal deposition nature. A plethora of useful micromachined device concepts have been demonstrated using Sandia National Laboratories' sophisticated in-house capabilities. One drawback to polysilicon is that in air the surface oxidizes, is high energy and is hydrophilic (i.e., it wets easily). This can lead to catastrophic failure because surface forces can cause MEMS parts that are brought into contact to adhere rather than perform their intended function. A fundamental concern is how environmental constituents such as water will affect adhesion energies in MEMS. The authors first demonstrated an accurate method to measure adhesion as reported in Chapter 1. In Chapter 2 through 5, they then studied the effect of water on adhesion depending on the surface condition (hydrophilic or hydrophobic). As described in Chapter 2, they find that adhesion energy of hydrophilic MEMS surfaces is high and increases exponentially with relative humidity (RH). Surface roughness is the controlling mechanism for this relationship. Adhesion can be reduced by several orders of magnitude by silane coupling agents applied via solution processing. They decrease the surface energy and render the surface hydrophobic (i.e. does not wet easily). However, only a molecular monolayer coats the surface. In Chapters 3-5 the authors map out the extent to which the monolayer reduces adhesion versus RH. They find that adhesion is

  6. Mesoscopic Capacitance Oscillations

    OpenAIRE

    Buttiker, Markus; Nigg, Simon

    2006-01-01

    We examine oscillations as a function of Fermi energy in the capacitance of a mesoscopic cavity connected via a single quantum channel to a metallic contact and capacitively coupled to a back gate. The oscillations depend on the distribution of single levels in the cavity, the interaction strength and the transmission probability through the quantum channel. We use a Hartree-Fock approach to exclude self-interaction. The sample specific capacitance oscillations are in marked contrast to the c...

  7. Aviation-oriented Micromachining Technology-Micro-ECM in Pure Water

    Institute of Scientific and Technical Information of China (English)

    Bao Huaiqian; Xu Jiawen; Li Ying

    2008-01-01

    This article proposes a precise and ecofriendly micromachining technology for aerospace application called electrochemical machining in pure water (PW-ECM). On the basis of the principles of water dissociation, a series of test setups and tests are devised and performed under different conditions. These tests explain the need for technological conditions realizing PW-ECM, and further explore the technological principles. The results from the tests demonstrate a successful removal of electrolytic slime by means of ultrasonic vibration of the workpiece. To ensure the stability and reliability of PW-ECM process, a new combined rnachining method of PW-ECM assisted with ultrasonic vibration (PW-ECM/USV) is devised. Trilateral and square cavities and holes as well as a group of English alphabets are worked out on a stainless steel plate. It is eonfirmed that PW-ECM will be probably an efficient new aviation precision machining method.

  8. Tribological issues of polysilicon surface-micromachining

    Energy Technology Data Exchange (ETDEWEB)

    Sniegowski, J.J.

    1997-12-01

    Polysilicon surface-micromachining is a Micro-Electro-Mechanical Systems (MEMS) manufacturing technology where the infrastructure for manufacturing silicon integrated circuits is used to fabricate micro-miniature mechanical devices. This presentation describes a multi-level mechanical polysilicon surface-micromachining technology and includes a discussion of the issues which affect device manufacture and performance. The multi-level technology was developed and is employed primarily to fabricate microactuated mechanisms. The intricate and complex motion offered by these devices is naturally accompanied by various forms of fraction and wear in addition to the classical stiction phenomena associated with micromechanical device fabrication and usage.

  9. Ultrasonic physics

    CERN Document Server

    Richardson, E G

    1962-01-01

    Ultrasonic Physics, Second Edition, provides an introduction to the fundamental principles of ultrasonic physics. The book opens with a discussion of the sources of ultrasound. This is followed by separate chapters on the properties and detection of ultrasonic radiation; measurement of propagation constants, i.e., the velocity and absorption, of ultrasound; ultrasound propagation in gases, liquids, and solids; and ultrasound propagation in aerosols, suspensions, and emulsions. The final chapter covers miscellaneous physical and physico-chemical actions, including dispersion and coagulation of

  10. Capacitive Substrate Coupling of Row–Column-Addressed 2-D CMUT Arrays

    DEFF Research Database (Denmark)

    Engholm, Mathias; Bouzari, Hamed; Jensen, Jørgen Arendt;

    2016-01-01

    the semiconductor substrate. To reduce the parasitic capacitance by 80% the bulk doping concentration should be at most 1012 cm-3. Experimental results show that the parasitic capacitance can be reduced by 87% by applying a substrate potential of 6V relative to the bottom electrodes. The depletion......Row–column-addressed CMUT arrays suffer from low receive sensitivity of the bottom elements due to a capacitive coupling to the substrate. The capacitive coupling increases the parasitic capacitance. A simple approach to reduce the parasitic capacitance is presented, which is based on depleting...... of the semiconductor substrate can be sustained for at least 10 minutes making it applicable for row–column-addressed CMUT arrays for ultrasonic imaging. Theoretically the reduced parasitic capacitance indicates that the receive sensitivity of the bottom elements can be increased by a factor of 2:1....

  11. The Development of Micromachined Gyroscope Structure and Circuitry Technology

    Directory of Open Access Journals (Sweden)

    Dunzhu Xia

    2014-01-01

    Full Text Available This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs, piezoelectric vibrating gyroscopes (PVGs, surface acoustic wave (SAW gyroscopes, bulk acoustic wave (BAW gyroscopes, micromachined electrostatically suspended gyroscopes (MESGs, magnetically suspended gyroscopes (MSGs, micro fiber optic gyroscopes (MFOGs, micro fluid gyroscopes (MFGs, micro atom gyroscopes (MAGs, and special micromachined gyroscopes. Next, the control electronics of micromachined gyroscopes are analyzed. The control circuits are categorized into typical circuitry and special circuitry technologies. The typical circuitry technologies include typical analog circuitry and digital circuitry, while the special circuitry consists of sigma delta, mode matching, temperature/quadrature compensation and novel special technologies. Finally, the characteristics of various typical gyroscopes and their development tendency are discussed and investigated in detail.

  12. The Development of Micromachined Gyroscope Structure and Circuitry Technology

    Science.gov (United States)

    Xia, Dunzhu; Yu, Cheng; Kong, Lun

    2014-01-01

    This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs), piezoelectric vibrating gyroscopes (PVGs), surface acoustic wave (SAW) gyroscopes, bulk acoustic wave (BAW) gyroscopes, micromachined electrostatically suspended gyroscopes (MESGs), magnetically suspended gyroscopes (MSGs), micro fiber optic gyroscopes (MFOGs), micro fluid gyroscopes (MFGs), micro atom gyroscopes (MAGs), and special micromachined gyroscopes. Next, the control electronics of micromachined gyroscopes are analyzed. The control circuits are categorized into typical circuitry and special circuitry technologies. The typical circuitry technologies include typical analog circuitry and digital circuitry, while the special circuitry consists of sigma delta, mode matching, temperature/quadrature compensation and novel special technologies. Finally, the characteristics of various typical gyroscopes and their development tendency are discussed and investigated in detail. PMID:24424468

  13. The development of micromachined gyroscope structure and circuitry technology.

    Science.gov (United States)

    Xia, Dunzhu; Yu, Cheng; Kong, Lun

    2014-01-01

    This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs), piezoelectric vibrating gyroscopes (PVGs), surface acoustic wave (SAW) gyroscopes, bulk acoustic wave (BAW) gyroscopes, micromachined electrostatically suspended gyroscopes (MESGs), magnetically suspended gyroscopes (MSGs), micro fiber optic gyroscopes (MFOGs), micro fluid gyroscopes (MFGs), micro atom gyroscopes (MAGs), and special micromachined gyroscopes. Next, the control electronics of micromachined gyroscopes are analyzed. The control circuits are categorized into typical circuitry and special circuitry technologies. The typical circuitry technologies include typical analog circuitry and digital circuitry, while the special circuitry consists of sigma delta, mode matching, temperature/quadrature compensation and novel special technologies. Finally, the characteristics of various typical gyroscopes and their development tendency are discussed and investigated in detail.

  14. Variable Synthetic Capacitance

    Science.gov (United States)

    Kleinberg, L. L.

    1986-01-01

    Feedback amplifier circuit synthesizes electronically variable capacitance. Variable Synthetic Capacitor is amplifier circuit with follower/feedback configuration. Effective input capacitance depends on input set current. If synthetic capacitor is connected across resonant element of oscillator, oscillator frequency controlled via input set current. Circuit especially suitable for fine frequency adjustments of piezoelectric-crystal or inductor/capacitor resonant oscillators.

  15. Electrostatic actuators fabricated by surface micromachining techniques

    OpenAIRE

    Legtenberg, Rob

    1996-01-01

    This thesis deals with "electrostatic actuators fabricated by surface micromachining techniques". It presents fabrication techniques, design issues, modelling and performance characteristics of a number of electrostatic actuators. These actuators can be used in future micromechanical devices and systems which have applications such as micropositioning, microfluidics, microsurgery etc.

  16. Ultrasonic transducer

    International Nuclear Information System (INIS)

    A description is given of an ultrasonic transducer capable of operating at high temperature and comprising a transducer crystal and a coupling piece. This coupling piece is composed of several thin plates, generally triangular in shape, in a material withstanding corrosion and high temperatures, these plates being applied one against the other by pressure. One of the edges of the coupling piece is designed so as to direct towards the junction surfaces of the various plates the ultrasonic waves reflected from the junction between the coupling piece and the piece to which the ultrasonic waves must be transmitted

  17. Capacitive chemical sensor

    Science.gov (United States)

    Manginell, Ronald P; Moorman, Matthew W; Wheeler, David R

    2014-05-27

    A microfabricated capacitive chemical sensor can be used as an autonomous chemical sensor or as an analyte-sensitive chemical preconcentrator in a larger microanalytical system. The capacitive chemical sensor detects changes in sensing film dielectric properties, such as the dielectric constant, conductivity, or dimensionality. These changes result from the interaction of a target analyte with the sensing film. This capability provides a low-power, self-heating chemical sensor suitable for remote and unattended sensing applications. The capacitive chemical sensor also enables a smart, analyte-sensitive chemical preconcentrator. After sorption of the sample by the sensing film, the film can be rapidly heated to release the sample for further analysis. Therefore, the capacitive chemical sensor can optimize the sample collection time prior to release to enable the rapid and accurate analysis of analytes by a microanalytical system.

  18. System for Measuring Capacitance

    Science.gov (United States)

    McNichol, Randal S. (Inventor)

    2001-01-01

    A system has been developed for detecting the level of a liquid in a tank wherein a capacitor positioned in the tank has spaced plates which are positioned such that the dielectric between the plates will be either air or the liquid, depending on the depth of the liquid in the tank. An oscillator supplies a sine wave current to the capacitor and a coaxial cable connects the capacitor to a measuring circuit outside the tank. If the cable is very long or the capacitance to be measured is low, the capacitance inherent in the coaxial cable will prevent an accurate reading. To avoid this problem, an inductor is connected across the cable to form with the capacitance of the cable a parallel resonant circuit. The impedance of the parallel resonant circuit is infinite, so that attenuation of the measurement signal by the stray cable capacitance is avoided.

  19. Capacitance pressure sensor

    Science.gov (United States)

    Eaton, William P.; Staple, Bevan D.; Smith, James H.

    2000-01-01

    A microelectromechanical (MEM) capacitance pressure sensor integrated with electronic circuitry on a common substrate and a method for forming such a device are disclosed. The MEM capacitance pressure sensor includes a capacitance pressure sensor formed at least partially in a cavity etched below the surface of a silicon substrate and adjacent circuitry (CMOS, BiCMOS, or bipolar circuitry) formed on the substrate. By forming the capacitance pressure sensor in the cavity, the substrate can be planarized (e.g. by chemical-mechanical polishing) so that a standard set of integrated circuit processing steps can be used to form the electronic circuitry (e.g. using an aluminum or aluminum-alloy interconnect metallization).

  20. Induced Charge Capacitive Deionization

    OpenAIRE

    Rubin, S.; Suss, M. E.; Biesheuvel, P. M.; Bercovici, M.

    2016-01-01

    We demonstrate the phenomenon of induced-charge capacitive deionization (ICCDI) that occurs around a porous and conducting particle immersed in an electrolyte, under the action of an external electrostatic field. The external electric field induces an electric dipole in the porous particle, leading to capacitive charging of its volume by both cations and anions at opposite poles. This regime is characterized both by a large RC charging time and a small electrochemical charge relaxation time, ...

  1. Nonlinear Quantum Capacitance

    OpenAIRE

    Wang, B; Zhao, X; Guo, H; Wang, J.

    1999-01-01

    We analyze the nonlinear voltage dependence of electrochemical capacitance for nanoscale conductors. This voltage dependence is due to the finite density of states of the conductors. Within Hartree theory we derive an exact expression for the electrochemical capacitance–voltage curve for a parallel plate system. The result suggests a quantum scanning capacitance microscopy at the nanoscale: by inverting the capacitance–voltage expression one is able to deduce the local spectral function of th...

  2. Model Design of Piezoelectric Micromachined Modal Gyroscope

    Directory of Open Access Journals (Sweden)

    Xiaojun Hu

    2011-01-01

    Full Text Available This paper reports a novel kind of solid-state microgyroscope, which is called piezoelectric micromachined modal gyroscope (PMMG. PMMG has large stiffness and robust resistance to shake and strike because there is no evident mass-spring component in its structure. This work focused on quantitative optimization of the gyroscope, which is still blank for such gyroscope. The modal analysis by the finite element method (FEM was firstly conducted. A set of quantitative indicators were developed to optimize the operation mode. By FEM, the harmonic analysis was conducted to find the way to efficiently actuate the operational mode needed. The optimal configuration of driving electrodes was obtained. At last, the Coriolis analysis was conducted to show the relation between angular velocity and differential output voltage by the Coriolis force under working condition. The results obtained in this paper provide theoretical basis for realizing this novel kind of micromachined gyroscope.

  3. Ultrasonic mammography

    International Nuclear Information System (INIS)

    608 women are examined by means of ultrasonic mammography during the period of 1 year. 432 patients were examined with the compound method with the U.I. Octoson, a water tank scanner, and 176 patients with the real time method with a directly connected linear-array-scanner. The following results were obtained at the end of the examination period: In the ultrasonic and also in the X-ray mammogram tumour diameters can be determined with an error rate of +- 30%. In the diagnosing of carcinomas, a significant dependence of the exactness on the sice of the tumour is found for the combination of the five methods tested (clinical examination, X-ray mammography, ultrasonic mammography, thermography, cytology). Classifying the individual methods with regard to their exactness, X-ray mammography ranks in front of ultrasonic mammography. Mastopathic changes in the breast can be screened by means of ultrasonic mammography. The structure of the changes can be determined more exactly than with an X-ray picture which is due to the possibility of differentiating solid and cystic structures. In diagnosing fibro-adenomas and establishing diagnoses on young women with dense gland bodies, ultrasonic mammography is superior to radiology both in the ability of screening a finding of a fibro-adenoma (US=88%, X-ray=75%) and in the possibility of classifying it as ''more benign than malignant''. (orig./MG)

  4. Micromachined Horn Antenna Operating at 75 GHz

    OpenAIRE

    Grzegorczyk, Tomasz M.; Zurcher, Jean-François; Renaud, Philippe; Mosig, Juan R.

    2000-01-01

    We propose in this paper an integrated cavity-backed horn antenna, generalizing the well-known SSFIP (Strip-Slot-Foam-Inverted Patch) design, operating at 75 GHz. The antenna was optimized using a full-wave software and realized using micromachining technologies. The proposed structure can be used for high radiation ef-ficiency antennas and arrays in the millimeter-wave band, since surface waves are inherently suppressed by the use of a metallic horn and a cavity configuration.

  5. Micromachined Parts Advance Medicine, Astrophysics, and More

    Science.gov (United States)

    2015-01-01

    In the mid-1990s, Marshall Space Flight Center awarded two SBIR contracts to Potomac Photonics, now based in Baltimore, for the development of computerized workstations capable of mass-producing tiny, intricate, diffractive optical elements. While the company has since discontinued the workstations, those contracts set the stage for Potomac Photonics to be a leader in the micromachining industry, where NASA remains one of its clients.

  6. Quantum capacitance: a microscopic derivation

    OpenAIRE

    Mukherjee, Sreemoyee; MANNINEN, M; Deo, P. Singha

    2010-01-01

    We start from microscopic approach to many body physics and show the analytical steps and approximations required to arrive at the concept of quantum capacitance. These approximations are valid only in the semi-classical limit and the quantum capacitance in that case is determined by Lindhard function. The effective capacitance is the geometrical capacitance and the quantum capacitance in series, and this too is established starting from a microscopic theory.

  7. Design of Surface Micromachined Compliant MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Joe Anthony Bradley

    2002-12-31

    The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a micro-compliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMs, most have used comb-drive actuation methods and bulk micromachining processes. This research focused on fully-compliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms.

  8. Design of Surface micromachined Compliant MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Joe Anthony Bradley

    2002-08-01

    The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a micro-compliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMS, most have used comb-drive actuation methods and bulk micromachining processes. This research focuses on fully-compliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms.

  9. Review of micromachining of ceramics by etching

    Institute of Scientific and Technical Information of China (English)

    H.T.TING; K.A.ABOU-EL-HOSSEIN; H.B.CHUA

    2009-01-01

    In the last two decades, there has been an enormous surge in interest in ceramic materials and, as a result, there have been significant advances in their development and applications. Their inherent properties, such as capability of operating at temperatures far above metals, high level of hardness and toughness, low coefficient of thermal expansion and high thermal conductivity rendered ceramics to be one of the leading engineering materials. Many research works have been conducted in the past few years on machining of advanced ceramics using different processing methods in order to obtain a better surface roughness, higher material removal rate and improved tool life. Micromachining using chemical etching is one of those methods that do not involve the problem of tool life and direct tool-work piece contact. However, only a few research works have been done on micromachining of ceramics using chemical etching. Hence, study of chemical machining of advanced ceramics is still needed as the process has found wide application in the industry because of its relative low operating costs. In this work, we summarize the recent progresses in machining of different types of advanced ceramics, material processing methods such as wet etching and dry etching, and finally the prospects for control of material removal rate and surface quality in the process of ceramic micromachining.

  10. Micromachined Piezoelectric Actuators for Cryogenic Adaptive Optics Project

    Data.gov (United States)

    National Aeronautics and Space Administration — TRS Technologies proposes micromachined single crystal piezoelectric actuator arrays to enable ultra-large stroke, high precision shape control for large aperture,...

  11. Ultrasonic neuromodulation

    Science.gov (United States)

    Naor, Omer; Krupa, Steve; Shoham, Shy

    2016-06-01

    Ultrasonic waves can be non-invasively steered and focused into mm-scale regions across the human body and brain, and their application in generating controlled artificial modulation of neuronal activity could therefore potentially have profound implications for neural science and engineering. Ultrasonic neuro-modulation phenomena were experimentally observed and studied for nearly a century, with recent discoveries on direct neural excitation and suppression sparking a new wave of investigations in models ranging from rodents to humans. In this paper we review the physics, engineering and scientific aspects of ultrasonic fields, their control in both space and time, and their effect on neuronal activity, including a survey of both the field’s foundational history and of recent findings. We describe key constraints encountered in this field, as well as key engineering systems developed to surmount them. In closing, the state of the art is discussed, with an emphasis on emerging research and clinical directions.

  12. SYSTEM-LEVEL SIMULATION OF VIBRATORY MICROMACHINED GYROSCOPE WITH FENCE STRUCTURE

    Institute of Scientific and Technical Information of China (English)

    Che Lufeng; Xiong Bin; Wang Yuelin

    2004-01-01

    An equivalent circuit model of a novel fence structure vibratory micromachined gyroscope's oscillating properties is modeled by electrical equivalent circuits according to its dynamics equation. Equivalent circuit model of oscillating and differential detection capacitance model are implemented in the circuit simulation tool PSPICE, which is available in oscillating properties analysis such as oscillating's transient response, steady response and frequency response to angular rate to optimize working mode of the gyroscope. The model also enables sensor simulation with the interfacing electronics to analyse the performances of the whole system. Behavioral simulation of the system is performed to prove the function of detection circuits. The simulation results and measurement results show that the design of circuits is feasible.

  13. Design and simulation of a tuning fork micromachined gyroscope with slide film damping

    Institute of Scientific and Technical Information of China (English)

    CHE Lu-feng; XIONG Bin; JIAO Ji-wei; WANG Yue-lin

    2005-01-01

    A novel tuning fork micromachined gyroscope, based on slide-film damping, is presented. The electrostatic driving gyroscope consists of two driving masses each of which supports one sensitive mass. The angular rate is sensed by the differential capacitances consisted of movable bar electrodes and fixed bar electrodes located on the glass wafer. The gyroscope can operate at atmospheric pressure with slide film damping in the driving and sensing directions, eliminate vacuum packaging and restrain cross-axis acceleration signal. The results of design and simulation show that the driving and sensing mode frequencies are 3 106 Hz and 3 175 Hz,respectively, and the Q-values in driving and sensitive modes are 1 721 and 1 450 respectively. The design resolution is 0.025°/s.

  14. High-frequency analysis on surface micromachined on-chip transformers with stacked interwinding coil structures

    International Nuclear Information System (INIS)

    On-chip micro-transformers with a stacked interwinding coil have been developed. The transformer is fabricated using simple and cost-effective MEMS surface micromachining. High-frequency characteristics of the transformer are analyzed by comparing its performances for various coil structures and substrate materials, respectively. The results show that the RF performance of the glass-based transformer is improved compared to that of a silicon-based transformer. An analysis of various coil configuration leads to the conclusion that the metal-to-metal capacitance has a significant influence on the RF characteristics. The process fabrication of the device is simple, highlighting good prospects for future three-dimensional RF-MEMS device application

  15. Scale Factor Determination of Micro-Machined Angular Rate Sensors Without a Turntable

    Institute of Scientific and Technical Information of China (English)

    Gaisser Alexander; GAO Zhongyu; ZHOU Bin; ZHANG Rong; CHEN Zhiyong

    2006-01-01

    This paper presents a digital readout system to detect small capacitive signals of a micro-machined angular rate sensor. The flexible parameter adjustment ability and the computation speed of the digital signal processor were used to develop a new calibration procedure to determine the scale factor of a gyroscope without a turntable. The force of gravity was used to deflect the movable masses in the sensor, which resulted in a corresponding angular rate input. The gyroscope scale factor was then measured without a turntable. Test results show a maximum deviation of about 1.2% with respect to the scale factor determined on a turntable with the accuracy independent of the manufacturing process and property variations. The calibration method in combination with the improved readout electronics can minimize the calibration procedure and, thus, reduce the manufacturing costs.

  16. Size Reduction of Tunable Micromachined Filters for High Speed Operations

    Institute of Scientific and Technical Information of China (English)

    Tomoyuki; Hino; Takeru; Amano; Wiganes; Janto; Fumio; Koyama

    2003-01-01

    The size reduction of tunable micromachined filters is carried out for high-speed wavelength tuning. We fabricated micromachined filters having a miniature structure with an air gap of 300 run and a short cantilever of 45 urn, exhibiting fast response of below 3 us.

  17. Technology and applications of micromachined silicon adaptive mirrors

    NARCIS (Netherlands)

    Vdovin, G.; Middelhoek, S.; Sarro, P.M.

    1997-01-01

    The technology of low-cost high-quality micromachined adaptive mirrors is reported. Adaptive mirrors are fabricated by combining bulk silicon micromachining with standard electronics technologies. Mirrors with tens of control channels, having RMS initial deviation from plane of the order of λ/20 and

  18. Ductile mode electrochemical oxidation assisted micromachining for glassy carbon

    International Nuclear Information System (INIS)

    Recently, a new mechanical machining process using electrochemical oxidation was reported. Electrochemical oxidation assisted micromachining was applied to the machining of glassy carbon. The material removal process of the electrochemical oxidation assisted micromachining consists of repeated cycles of oxidation followed by removal of the oxide layer. In this paper, we experimentally investigate and compare the critical chip thickness for ductile mode cutting in mechanical machining and electrochemical oxidation assisted micromachining of glassy carbon. The theoretical critical chip thickness is calculated for mechanical machining of glassy carbon and experimentally verified. The effect of electrochemical oxidation on the critical chip thickness for ductile mode micromachining is also studied for glassy carbon. It is found that the critical chip thickness is increased for the electrochemical oxidation assisted micromachining. (paper)

  19. A Flexible Ultrasound Transducer Array with Micro-Machined Bulk PZT

    Directory of Open Access Journals (Sweden)

    Zhe Wang

    2015-01-01

    Full Text Available This paper proposes a novel flexible piezoelectric micro-machined ultrasound transducer, which is based on PZT and a polyimide substrate. The transducer is made on the polyimide substrate and packaged with medical polydimethylsiloxane. Instead of etching the PZT ceramic, this paper proposes a method of putting diced PZT blocks into holes on the polyimide which are pre-etched. The device works in d31 mode and the electromechanical coupling factor is 22.25%. Its flexibility, good conformal contacting with skin surfaces and proper resonant frequency make the device suitable for heart imaging. The flexible packaging ultrasound transducer also has a good waterproof performance after hundreds of ultrasonic electric tests in water. It is a promising ultrasound transducer and will be an effective supplementary ultrasound imaging method in the practical applications.

  20. Surface micromachined electrostatically actuated micro peristaltic pump

    OpenAIRE

    Xie, Jun; Shih, Jason; Lin, Qiao; Yang, Bozhi; Tai, Yu-Chong

    2004-01-01

    An electrostatically actuated micro peristaltic pump is reported. The micro pump is entirely surface micromachined using a multilayer parylene technology. Taking advantage of the multilayer technology, the micro pump design enables the pumped fluid to be isolated from the electric field. Electrostatic actuation of the parylene membrane using both DC and AC voltages was demonstrated and applied to fluid pumping based on a 3-phase peristaltic sequence. A maximum flow rate of 1.7 nL min^–1 and a...

  1. Active micromachines: Microfluidics powered by mesoscale turbulence

    CERN Document Server

    Thampi, Sumesh P; Shendruk, Tyler N; Golestanian, Ramin; Yeomans, Julia M

    2016-01-01

    Dense active matter, from bacterial suspensions and microtubule bundles driven by motor proteins to cellular monolayers and synthetic Janus particles, is characterised by mesoscale turbulence, the emergence of chaotic flow structures. By immersing an ordered array of symmetric rotors in an active fluid, we introduce a microfluidic system that exploits spontaneous symmetry breaking in mesoscale turbulence to generate work. The lattice of rotors self-organises into a spin-state where neighbouring discs continuously rotate in permanent alternating directions due to combined hydrodynamic and elastic effects. Our virtual prototype demonstrates a new research direction for the design of micromachines powered by the nematohydrodynamic properties of active turbulence.

  2. Active micromachines: Microfluidics powered by mesoscale turbulence

    Science.gov (United States)

    Thampi, Sumesh P.; Doostmohammadi, Amin; Shendruk, Tyler N.; Golestanian, Ramin; Yeomans, Julia M.

    2016-01-01

    Dense active matter, from bacterial suspensions and microtubule bundles driven by motor proteins to cellular monolayers and synthetic Janus particles, is characterized by mesoscale turbulence, which is the emergence of chaotic flow structures. By immersing an ordered array of symmetric rotors in an active fluid, we introduce a microfluidic system that exploits spontaneous symmetry breaking in mesoscale turbulence to generate work. The lattice of rotors self-organizes into a spin state where neighboring discs continuously rotate in permanent alternating directions due to combined hydrodynamic and elastic effects. Our virtual prototype demonstrates a new research direction for the design of micromachines powered by the nematohydrodynamic properties of active turbulence. PMID:27419229

  3. Active micromachines: Microfluidics powered by mesoscale turbulence.

    Science.gov (United States)

    Thampi, Sumesh P; Doostmohammadi, Amin; Shendruk, Tyler N; Golestanian, Ramin; Yeomans, Julia M

    2016-07-01

    Dense active matter, from bacterial suspensions and microtubule bundles driven by motor proteins to cellular monolayers and synthetic Janus particles, is characterized by mesoscale turbulence, which is the emergence of chaotic flow structures. By immersing an ordered array of symmetric rotors in an active fluid, we introduce a microfluidic system that exploits spontaneous symmetry breaking in mesoscale turbulence to generate work. The lattice of rotors self-organizes into a spin state where neighboring discs continuously rotate in permanent alternating directions due to combined hydrodynamic and elastic effects. Our virtual prototype demonstrates a new research direction for the design of micromachines powered by the nematohydrodynamic properties of active turbulence. PMID:27419229

  4. Ultrasonic transducer

    International Nuclear Information System (INIS)

    An ultrasonic transducer suitable for use up to a temperature of about 6000C comprises a stainless steel casing containing a lithium niobate piezoelectric element and a backing material of a powder which provides a partial pressure of oxygen and thereby prevents deterioration of the element by oxygen loss or contamination. The powder might be of lithium niobate or magnesia. (author)

  5. Membrane capacitive deionization

    NARCIS (Netherlands)

    Biesheuvel, P.M.; Wal, van der A.

    2010-01-01

    Membrane capacitive deionization (MCDI) is an ion-removal process based on applying an electrical potential difference across an aqueous solution which flows in between oppositely placed porous electrodes, in front of which ion-exchange membranes are positioned. Due to the applied potential, ions ar

  6. Steerable Capacitive Proximity Sensor

    Science.gov (United States)

    Jenstrom, Del T.; Mcconnell, Robert L.

    1994-01-01

    Steerable capacitive proximity sensor of "capaciflector" type based partly on sensing units described in GSC-13377 and GSC-13475. Position of maximum sensitivity adjusted without moving sensor. Voltage of each driven shield adjusted separately to concentrate sensing electric field more toward one side or other.

  7. Digital capacitance measuring system

    Science.gov (United States)

    1973-01-01

    The hardware phase of a digital capacitance measuring system is presented with the major emphasis placed on the electrical design and operation. Test results are included of the three units fabricated. The system's interface is applicable to existing requirements for the space shuttle vehicle.

  8. Calculating and optimizing inter-electrode capacitances of charge division microchannel plate detectors

    Science.gov (United States)

    Xing, Yan; Chen, Bo; Zhang, Hong-Ji; Wang, Hai-Feng; He, Ling-Ping; Jin, Fang-Yuan

    2016-04-01

    Based on the principle of charge division microchannel plate detectors, the inter-electrode capacitances of charge division anodes which are related to electronic noise of the charge sensitive amplifier and crosstalk effect of the anode are presented. Under all the requirements of charge division microchannel plate detectors such as the imaging linearity and spatial resolution, decreasing the inter-electrode capacitances is one way to improve the imaging performance. In this paper, we illustrate the simulation process of calculating the inter-electrode capacitances. Moreover, a Wedge and Strip (WSZ) anode is fabricated with the picosecond laser micromachining process. Comparing the simulated capacitances and measured capacitances, the three-dimensional finite element method is proved to be valid. Furthermore, by adjusting the design parameters of the anode, the effects of the substrate permittivity, insulation width and the size of pitch on the inter-electrode capacitances have been analysed. The structure of the charge division anode has been optimized based on the simulation data.

  9. Induced Charge Capacitive Deionization

    CERN Document Server

    Rubin, S; Biesheuvel, P M; Bercovici, M

    2016-01-01

    We demonstrate the phenomenon of induced-charge capacitive deionization (ICCDI) that occurs around a porous and conducting particle immersed in an electrolyte, under the action of an external electrostatic field. The external electric field induces an electric dipole in the porous particle, leading to capacitive charging of its volume by both cations and anions at opposite poles. This regime is characterized both by a large RC charging time and a small electrochemical charge relaxation time, which leads to rapid and significant deionization of ionic species from a volume which is on the scale of the particle. We show by theory and experiment that the transient response around a cylindrical particle results in spatially non-uniform charging and non-steady growth of depletion regions which emerge around the particle's poles. Potentially, ICCDI can be useful in applications where fast concentration changes of ionic species are required over large volumes.

  10. Design of Capacitance to Voltage Converter for Capacitive Sensor Transducer

    Directory of Open Access Journals (Sweden)

    A. H.M.Z. Alam

    2010-01-01

    Full Text Available Problem statement: The design of Capacitance to Voltage Converter (CVC for capacitive sensor transducer was presented. The proposed design will reduce the size, power consumption and supply voltage of the circuit and can be used in high frequency band transducer. Approach: The design was implemented using the Operational amplifier (Op amp and capacitive network. The circuit was simulated using the PSPICE model parameters based on standard 0.13 μm CMOS process. Results: The design was able to measure a wide range of capacitance variations for the capacitive transducer. The performance analysis of the design showed desirable performance parameters in terms of response, low power consumption and a linear output voltage within the wide range of capacitive transducer capacitance variation for the power supply voltage of 1.2 V was achieved. Conclusion/Recommendations: The output voltage of the circuit varied linearly with the variation of capacitive transducer capacitance variation. The improved converter was compact and robust for integration into capacitive measuring systems and suitable for use in environment that making use of higher frequency band.

  11. Molecular Aspects of Capacitation

    OpenAIRE

    Gulfidan Zulfikaroglu; Hulya Ozgur; Sait Polaturkey

    2010-01-01

    Male and female gamets are derived from the primordial germ cells, which migrate from the wall of the yolk sac toward the developing gonads. Following a series of mitotic divisions these cells increase in number at the gonads. The primordial germ cells differentiate into spermatogonia and take the form of mature spermatozoa after spermotogensis and spermotogenesis at puberty. Capacitation is the reaction, which includes all of the molecular and physiological events of mature sperm to gain the...

  12. Electrical capacitance clearanceometer

    Science.gov (United States)

    Hester, Norbert J. (Inventor); Hornbeck, Charles E. (Inventor); Young, Joseph C. (Inventor)

    1992-01-01

    A hot gas turbine engine capacitive probe clearanceometer is employed to measure the clearance gap or distance between blade tips on a rotor wheel and its confining casing under operating conditions. A braze sealed tip of the probe carries a capacitor electrode which is electrically connected to an electrical inductor within the probe which is inserted into a turbine casing to position its electrode at the inner surface of the casing. Electrical power is supplied through a voltage controlled variable frequency oscillator having a tuned circuit in which the probe is a component. The oscillator signal is modulated by a change in electrical capacitance between the probe electrode and a passing blade tip surface while an automatic feedback correction circuit corrects oscillator signal drift. A change in distance between a blade tip and the probe electrode is a change in capacitance therebetween which frequency modulates the oscillator signal. The modulated oscillator signal which is then processed through a phase detector and related circuitry to provide an electrical signal is proportional to the clearance gap.

  13. Microscope Cells Containing Multiple Micromachined Wells

    Science.gov (United States)

    Turner, Walter; Skupinski, Robert

    2003-01-01

    Tech Briefs, May 2003 19 Manufacturing Microscope Cells Containing Multiple Micromachined Wells The cost per cell has been reduced substantially. John H. Glenn Research Center, Cleveland, Ohio An improved design for multiple-well microscope cells and an associated improved method of fabricating them have been devised. [As used here, "well" denotes a cavity that has a volume of about 1 or 2 L and that is used to hold a sample for examination under a microscope. As used here, "cell" denotes a laminate, based on a standard 1- by 3-in. (2.54- by 7.62-cm) microscope slide, that comprises (1) the slide as the lower layer, (2) an intermediate layer that contains holes that serve as the wells, and (3) a top layer that either consists of, or is similar to, a standard microscope-slide cover slip.] The improved design and method of fabrication make it possible to increase (relative to a prior design and method of fabrication) the number of wells per cell while reducing the fabrication loss and reducing the cost per cell to about one-tenth of the prior value. In the prior design and method, the slide, well, and cover-slip layers were made from silicate glass. The fabrication of each cell was a labor-intensive process that included precise cutting and grinding of the glass components, fusing of the glass components, and then more grinding and polishing to obtain desired dimensions. Cells of the prior design were expensive and fragile, the rate of loss in fabrication was high, and the nature of the glass made it difficult to increase the number of cells per well. Efforts to execute alternative prior designs in plastic have not yielded satisfactory results because, for typical applications, plastics are not sufficiently thermally or chemically stable, not sufficiently optically clear, and/or not hard enough to resist scratching. The figure depicts a cell of the present improved type. The slide and cover-slip layers are made of a low-thermal-expansion glass (Pyrex(TradeMark) or

  14. The Cooling and Lubrication Performance of Graphene Platelets in Micro-Machining Environments

    Science.gov (United States)

    Chu, Bryan

    The research presented in this thesis is aimed at investigating the use of graphene platelets (GPL) to address the challenges of excessive tool wear, reduced part quality, and high specific power consumption encountered in micro-machining processes. There are two viable methods of introducing GPL into micro-machining environments, viz., the embedded delivery method, where the platelets are embedded into the part being machined, and the external delivery method, where graphene is carried into the cutting zone by jetting or atomizing a carrier fluid. The study involving the embedded delivery method is focused on the micro-machining performance of hierarchical graphene composites. The results of this study show that the presence of graphene in the epoxy matrix improves the machinability of the composite. In general, the tool wear, cutting forces, surface roughness, and extent of delamination are all seen to be lower for the hierarchical composite when compared to the conventional two-phase glass fiber composite. These improvements are attributed to the fact that graphene platelets improve the thermal conductivity of the matrix, provide lubrication at the tool-chip interface and also improve the interface strength between the glass fibers and the matrix. The benefits of graphene are seen to also carry over to the external delivery method. The platelets provide improved cooling and lubrication performance to both environmentally-benign cutting fluids as well as to semi-synthetic cutting fluids used in micro-machining. The cutting performance is seen to be a function of the geometry (i.e., lateral size and thickness) and extent of oxygen-functionalization of the platelet. Ultrasonically exfoliated platelets (with 2--3 graphene layers and lowest in-solution characteristic lateral length of 120 nm) appear to be the most favorable for micro-machining applications. Even at the lowest concentration of 0.1 wt%, they are capable of providing a 51% reduction in the cutting

  15. A micromachined pressure/flow sensor

    NARCIS (Netherlands)

    Oosterbroek, R.E.; Lammerink, T.S.J.; Berenschot, J.W.; Krijnen, G.J.M.; Elwenspoek, M.C.; Berg, van den A.

    1999-01-01

    The micromechanical equivalent of a differential pressure flow-sensor, well known in macro mechanics, is discussed. Two separate pressure sensors are used for the device, enabling to measure both, pressure as well as volume flow-rate. An integrated sensor with capacitive read-out as well as a hybrid

  16. A single-layer micromachined tunable capacitor with an electrically floating plate

    Science.gov (United States)

    Khan, Fahimullah; Zhu, Yong; Lu, Junwei; Pal, Jitendra; Viet Dao, Dzung

    2016-04-01

    This paper reports a novel micromachined tunable capacitor with an electrically floating movable plate. The device has been fabricated from a single metal layer based on a low-cost standard process. Tunable capacitors with electrically floating and non-floating plates have been characterized and compared with each other by using the same fabricated device with different configurations. The floating tunable capacitor exhibits a higher quality factor (Q-factor) compared to a non-floating capacitor by eliminating the spring’s resistance loss in radio frequency signal path. The device is actuated by an electro-thermal actuator to achieve high capacitance tuning range without the pull-in effect issue of parallel-plate electrostatic actuators. Experimental results show that the tunable capacitor has a wide capacitance tuning range of 631% with a low actuation voltage of 0.72 V. The floating tunable capacitor has a Q-factor at 1 GHz of 24.4, which is 5.5 times higher than that of a non-floating traditional tunable capacitor fabricated on the same chip.

  17. A Micromachined Pressure Sensor with Integrated Resonator Operating at Atmospheric Pressure

    Directory of Open Access Journals (Sweden)

    Sen Ren

    2013-12-01

    Full Text Available A novel resonant pressure sensor with an improved micromechanical double-ended tuning fork resonator packaged in dry air at atmospheric pressure is presented. The resonator is electrostatically driven and capacitively detected, and the sensor is designed to realize a low cost resonant pressure sensor with medium accuracy. Various damping mechanisms in a resonator that is vibrating at atmospheric pressure are analyzed in detail, and a formula is developed to predict the overall quality factor. A trade-off has been reached between the quality factor, stress sensitivity and drive capability of the resonator. Furthermore, differential sense elements and the method of electromechanical amplitude modulation are used for capacitive detection to obtain a large signal-to-noise ratio. The prototype sensor chip is successfully fabricated using a micromachining process based on a commercially available silicon-on-insulator wafer and is hermetically encapsulated in a custom 16-pin Kovar package. Preliminary measurements show that the fundamental frequency of the resonant pressure sensor is approximately 34.55 kHz with a pressure sensitivity of 20.77 Hz/kPa. Over the full scale pressure range of 100–400 kPa and the whole temperature range of −20–60 °C, high quality factors from 1,146 to 1,772 are obtained. The characterization of the prototype sensor reveals the feasibility of a resonant pressure sensor packaged at atmospheric pressure.

  18. Surface Micromachined Arrays of Transition-Edge Detectors Project

    Data.gov (United States)

    National Aeronautics and Space Administration — An innovative surface micromachining technique is described for the fabrication of closely-packed arrays of transition edge sensor (TES) x-ray microcalorimeters....

  19. Structure optimization and simulation analysis of the quartz micromachined gyroscope

    Directory of Open Access Journals (Sweden)

    Xuezhong Wu

    2014-02-01

    Full Text Available Structure optimization and simulation analysis of the quartz micromachined gyroscope are reported in this paper. The relationships between the structure parameters and the frequencies of work mode were analysed by finite element analysis. The structure parameters of the quartz micromachined gyroscope were optimized to reduce the difference between the frequencies of the drive mode and the sense mode. The simulation results were proved by testing the prototype gyroscope, which was fabricated by micro-electromechanical systems (MEMS technology. Therefore, the frequencies of the drive mode and the sense mode can match each other by the structure optimization and simulation analysis of the quartz micromachined gyroscope, which is helpful in the design of the high sensitivity quartz micromachined gyroscope.

  20. Capacitance of circular patch resonator

    Energy Technology Data Exchange (ETDEWEB)

    Miano, G.; Verolino, L. [Dip. di Ingegneria Elettrica, Ist. Nazionale di Fisica Nucleare, Naples (Italy); Panariello, G. [Dip. di Ingegneria Elettronica, Naples (Italy); Vaccaro, V.G. [Ist. Nazionale di Fisica Nucleare, Naples (Italy). Dipt. di Scienze Fisiche

    1995-11-01

    In this paper the capacitance of the circular microstrip patch resonator is computed. It is shown that the electrostatic problem can be formulated as a system of dual integral equations, and the most interesting techniques of solutions of these systems are reviewed. Some useful approximated formulas for the capacitance are derived and plots of the capacitance are finally given in a wide range of dielectric constants.

  1. Improved Capacitive Liquid Sensor

    Science.gov (United States)

    Waldman, Francis A.

    1992-01-01

    Improved capacitive sensor used to detect presence and/or measure thickness of layer of liquid. Electrical impedance or admittance of sensor measured at prescribed frequency, and thickness of liquid inferred from predetermined theoretical or experimental relationship between impedance and thickness. Sensor is basically a three-terminal device. Features interdigitated driving and sensing electrodes and peripheral coplanar ground electrode that reduces parasitic effects. Patent-pending because first to utilize ground plane as "shunting" electrode. System less expensive than infrared, microwave, or refractive-index systems. Sensor successfully evaluated in commercial production plants to characterize emulsions, slurries, and solutions.

  2. Modern ultrasonic flowmeters

    Science.gov (United States)

    Gurevich, V. M.; Truman, S. G.

    1986-01-01

    The current status of ultrasonic flowmeters were reviewed on the basis of materials published in the Soviet Union and elsewhere. The following advantages of ultrasonic flowmeters over earlier instruments are cited. A comparative analysis is made of the design methods employed in ultrasonic flowmeters. The evolution of ultrasonic flowmetering is traced from the first generation and trends in their development are analyzed.

  3. Programmable electronic synthesized capacitance

    Science.gov (United States)

    Kleinberg, Leonard L. (Inventor)

    1987-01-01

    A predetermined and variable synthesized capacitance which may be incorporated into the resonant portion of an electronic oscillator for the purpose of tuning the oscillator comprises a programmable operational amplifier circuit. The operational amplifier circuit has its output connected to its inverting input, in a follower configuration, by a network which is low impedance at the operational frequency of the circuit. The output of the operational amplifier is also connected to the noninverting input by a capacitor. The noninverting input appears as a synthesized capacitance which may be varied with a variation in gain-bandwidth product of the operational amplifier circuit. The gain-bandwidth product may, in turn, be varied with a variation in input set current with a digital to analog converter whose output is varied with a command word. The output impedance of the circuit may also be varied by the output set current. This circuit may provide very small ranges in oscillator frequency with relatively large control voltages unaffected by noise.

  4. A novel capacitive micro-accelerometer with grid strip capacitances and sensing gap alterable capacitances

    Institute of Scientific and Technical Information of China (English)

    Dong Linxi; Chen Jindan; Yan Haixia; Huo Weihong; Li Yongjie; Sun Lingling

    2009-01-01

    The comb capacitances fabricated by deep reactive ion etching (RIE) process have high aspect ratio which is usually smaller than 30 : 1 for the complicated process factors, and the combs are usually not parallel due to the well-known micro-loading effect and other process factors, which restricts the increase of the seismic mass by increasing the thickness of comb to reduce the thermal mechanical noise and the decrease of the gap of the comb capacitances for increasing the sensitive capacitance to reduce the electrical noise. Aiming at the disadvantage of the deep RIE, a novel capacitive micro-accelerometer with grid strip capacitances and sensing gap alterable capacitances is developed. One part of sensing of inertial signal of the micro-accelerometer is by the grid strip capacitances whose overlapping area is variable and which do not have the non-parallel plate's effect caused by the deep RIE process. Another part is by the sensing gap alterable capacitances whose gap between combs can be reduced by the actuators. The designed initial gap of the alterable comb capacitances is relatively large to depress the effect of the maximum aspect ratio (30 : 1) of deep RIE process. The initial gap of the capacitance of the actuator is smaller than the one of the comb capacitances. The difference between the two gaps is the initial gap of the sensitive capacitor. The designed structure depresses greatly the requirement of deep RIE process. The effects of non-parallel combs on the accelerometer are also analyzed. The characteristics of the micro-accelerometer are discussed by field emission microscopy (FEM) tool ANSYS. The tested devices based on slide-film damping effect are fabricated, and the tested quality factor is 514, which shows that grid strip capacitance design can partly improve the resolution and also prove the feasibility of the designed silicon-glass anodically bonding process.

  5. Silicon Micromachined Microlens Array for THz Antennas

    Science.gov (United States)

    Lee, Choonsup; Chattopadhyay, Goutam; Mehdi, IImran; Gill, John J.; Jung-Kubiak, Cecile D.; Llombart, Nuria

    2013-01-01

    5 5 silicon microlens array was developed using a silicon micromachining technique for a silicon-based THz antenna array. The feature of the silicon micromachining technique enables one to microfabricate an unlimited number of microlens arrays at one time with good uniformity on a silicon wafer. This technique will resolve one of the key issues in building a THz camera, which is to integrate antennas in a detector array. The conventional approach of building single-pixel receivers and stacking them to form a multi-pixel receiver is not suited at THz because a single-pixel receiver already has difficulty fitting into mass, volume, and power budgets, especially in space applications. In this proposed technique, one has controllability on both diameter and curvature of a silicon microlens. First of all, the diameter of microlens depends on how thick photoresist one could coat and pattern. So far, the diameter of a 6- mm photoresist microlens with 400 m in height has been successfully microfabricated. Based on current researchers experiences, a diameter larger than 1-cm photoresist microlens array would be feasible. In order to control the curvature of the microlens, the following process variables could be used: 1. Amount of photoresist: It determines the curvature of the photoresist microlens. Since the photoresist lens is transferred onto the silicon substrate, it will directly control the curvature of the silicon microlens. 2. Etching selectivity between photoresist and silicon: The photoresist microlens is formed by thermal reflow. In order to transfer the exact photoresist curvature onto silicon, there needs to be etching selectivity of 1:1 between silicon and photoresist. However, by varying the etching selectivity, one could control the curvature of the silicon microlens. The figure shows the microfabricated silicon microlens 5 x5 array. The diameter of the microlens located in the center is about 2.5 mm. The measured 3-D profile of the microlens surface has a

  6. Optimal pricing of capacitated networks

    NARCIS (Netherlands)

    Grigoriev, Alexander; Loon, van Joyce; Sitters, René; Uetz, Marc

    2009-01-01

    We address the algorithmic complexity of a profit maximization problem in capacitated, undirected networks. We are asked to price a set of $m$ capacitated network links to serve a set of $n$ potential customers. Each customer is interested in purchasing a network connection that is specified by a si

  7. Development of Micromachine Gas Turbine for Portable Power Generation

    Science.gov (United States)

    Isomura, Kousuke; Tanaka, Shuji; Togo, Shinichi; Kanebako, Hideki; Murayama, Motohide; Saji, Nobuyoshi; Sato, Fumihiro; Esashi, Masayoshi

    Micromachine gas turbine with centrifugal impellers of 10mm diameter fabricated by 5-axis micro-milling is under development at Tohoku University, in conjunction with Ishikawajima-Harima Heavy Industries Co., Ltd. (IHI), Tohoku-Gakuin University, and Sankyo Seiki Mfg. Co., Ltd. The development is currently at the stage of proving the feasibility of the gas turbine cycle by component tests. Micro-combustors have been developed for both hydrogen and methane fuel. Over 99.9% of the combustion efficiency has been realized in both combustors and the baseline configuration of the combustor for the gas turbine is set. A compressor of 10mm diameter has been developed as a micromachined turbocharger. The performance test of the micromachined turbocharger has been started, and ran up to 566000rpm, which is approximately 65% of the design speed. Compressor performance has been successfully measured along a constant speed line at 55% of the design speed.

  8. High-performance micromachined gyroscope with a slanted suspension cantilever

    Energy Technology Data Exchange (ETDEWEB)

    Xiao Dingbang; Wu Xuezhong; Hou Zhanqiang; Chen Zhihua; Dong Peitao; Li Shengyi, E-mail: Dingbangxiao@yahoo.com.c [Microsystem Laboratory, National University of Defense Technology, Changsha 410073 (China)

    2009-04-15

    This paper presents a novel structure for improving the stability and the mechanical noise of micromachined gyroscopes. Only one slanted cantilever is used for suspension in this gyroscope, so the asymmetry spring and the thermal stress, which most micromachined gyroscopes suffer from, are reduced. In order to reduce the mechanical noise, the proof masses are designed to be much larger than in most micromachined gyroscopes. The gyroscope chip is sealed at 0.001 Pa vacuum. A gyroscope sample and its read-out circuit are fabricated. The scale factor of this gyroscope is measured as 57.6 mV/(deg/sec) with a nonlinearity better than 0.12% in a measurement range of +-100 deg/sec. The short-term bias stability in 20 min is 60 deg/h.

  9. High-performance micromachined gyroscope with a slanted suspension cantilever

    Institute of Scientific and Technical Information of China (English)

    Xiao Dingbang; Wu Xuezhong; Hou Zhanqiang; Chen Zhihua; Dong Peitao; Li Shengyi

    2009-01-01

    This paper presents a novel structure for improving the stability and the mechanical noise of micromachined gyroscopes.Only one slanted cantilever is used for suspension in this gyroscope,so the asymmetry spring and the thermal stress,which most micromachined gyroscopes suffer from,are reduced.In order to reduce the mechanical noise,the proof masses are designed to be much larger than in most micromachined gyroscopes.The gyroscope chip is sealed at 0.00 1 Pa vacuum.A gyroscope sample and its read-out circuit are fabricated.The scale factor of this gyroscope is measured as 57.6 mV/(deg/sec) with a nonlinearity better than 0.12%in a measurement range of ±100 deg/sec.The short-term bias stability in 20 min is 60 deg/h.

  10. Micromachined cutting blade formed from {211}-oriented silicon

    Energy Technology Data Exchange (ETDEWEB)

    Fleming, James G.; Sniegowski, Jeffry J.; Montague, Stephen

    2003-09-09

    A cutting blade is disclosed fabricated of micromachined silicon. The cutting blade utilizes a monocrystalline silicon substrate having a {211} crystalline orientation to form one or more cutting edges that are defined by the intersection of {211} crystalline planes of silicon with {111} crystalline planes of silicon. This results in a cutting blade which has a shallow cutting-edge angle .theta. of 19.5.degree.. The micromachined cutting blade can be formed using an anisotropic wet etching process which substantially terminates etching upon reaching the {111} crystalline planes of silicon. This allows multiple blades to be batch fabricated on a common substrate and separated for packaging and use. The micromachined cutting blade, which can be mounted to a handle in tension and optionally coated for increased wear resistance and biocompatibility, has multiple applications including eye surgery (LASIK procedure).

  11. Micromachined cutting blade formed from {211}-oriented silicon

    Energy Technology Data Exchange (ETDEWEB)

    Fleming, James G. (Albuquerque, NM); Fleming, legal representative, Carol (Burbank, CA); Sniegowski, Jeffry J. (Tijeras, NM); Montague, Stephen (Albuquerque, NM)

    2011-08-09

    A cutting blade is disclosed fabricated of micromachined silicon. The cutting blade utilizes a monocrystalline silicon substrate having a {211} crystalline orientation to form one or more cutting edges that are defined by the intersection of {211} crystalline planes of silicon with {111} crystalline planes of silicon. This results in a cutting blade which has a shallow cutting-edge angle .theta. of 19.5.degree.. The micromachined cutting blade can be formed using an anisotropic wet etching process which substantially terminates etching upon reaching the {111} crystalline planes of silicon. This allows multiple blades to be batch fabricated on a common substrate and separated for packaging and use. The micromachined cutting blade, which can be mounted to a handle in tension and optionally coated for increased wear resistance and biocompatibility, has multiple applications including eye surgery (LASIK procedure).

  12. Integrated control and health monitoring capacitive displacement sensor development task. Orbit transfer rocket engine technology program

    Science.gov (United States)

    Collamore, Frank N.

    1989-01-01

    The development of a miniature multifunction turbomachinery shaft displacement sensor using state-of-the-art non-contract capacitive sensing technology is described. Axial displacement, radial displacement, and speed are sensed using a single probe within the envelope normally required for a single function. A survey of displacement sensing technology is summarized including inductive, capacitive, optical and ultrasonic techniques. The design and operation of an experimental triple function sensor is described. Test results are included showing calibration tests and simultaneous dynamic testing of multiple functions. Recommendations for design changes are made to improve low temperature performance, reliability, and for design of a flight type signal conditioning unit.

  13. Void-Free Direct Bonding of CMUT Arrays with Single Crystalline Plates and Pull- In Insulation

    DEFF Research Database (Denmark)

    Christiansen, Thomas Lehrmann; Hansen, Ole; Dahl Johnsen, Mathias;

    2013-01-01

    The implications on direct bonding quality, when using a double oxidation step to fabricate capacitive micromachined ultrasonic transducers (CMUTs), is analyzed. The protrusions along the CMUT cavity edges created during the second oxidation are investigated using simulations, AFM measurements, a...

  14. Creation of a metallic micromachined chain mail fabric

    Science.gov (United States)

    Engel, Jonathan; Liu, Chang

    2007-03-01

    The fabrication and testing of a metallic micromachined fabric is presented. The fabric, similar in construction to chain mail, consists of small rings and links built upon a planar substrate and then released to yield a sheet that can bend along two axes and drape over curved surfaces. This micromachined fabric exhibits unique mechanical and electrical properties owing to the geometry and materials employed. Tests of electrical conduction under stress and mechanical failure strength are presented. Resistance of the chain mail is found to vary over nearly seven orders of magnitude under mechanical deformation. Combined with existing techniques, the new fabric holds promise to allow fully engineered smart textiles.

  15. Capacitive deionization system

    Energy Technology Data Exchange (ETDEWEB)

    Richardson, J. H., LLNL

    1996-10-01

    The new capacitive deionization system (CDI) removes ions, contaminants impurities from water and other aqueous process streams, and further selectively places the removed ions back into solution during regeneration. It provides a separation process that does not utilize chemical regeneration processes, and thus significantly reduces or completely eliminates secondary wastes associated with the operation of ion exchange resins. In the CDI, electrolyte flows in open channels formed between adjacent electrodes, and consequently the pressure drop is much lower than conventional separation processes. The fluid flow can be gravity fed through these open channels, and does not require membranes. This feature represents a significant advantage over the conventional reverse osmosis systems which include water permeable cellulose acetate membranes, and over the electrodialysis systems which require expensive and exotic ion exchange membranes. The CDI is adaptable for use in a wide variety of commercial applications, including domestic water softening, industrial water softening, waste water purification, sea water desalination, treatment of nuclear and aqueous wastes, treatment of boiler water in nuclear and fossil power plants, production of high-purity water for semiconductor processing, and removal of salt from water for agricultural irrigation. CDI accomplishes this removal of impurities by a variety of mechanisms, but predominantly by electrostatic removal of organic and inorganic ions from water or any other dielectric solvent.

  16. Efficiency of Capacitively Loaded Converters

    DEFF Research Database (Denmark)

    Andersen, Thomas; Huang, Lina; Andersen, Michael A. E.;

    2012-01-01

    is introduced as a definition of efficiency. The calculated and measured efficiency curves for charging DEAP actuator, polypropylene film capacitor and X7R MLCC are provided and compared. The attention has to be paid for the voltage dependent capacitive load, like X7R MLCC, when evaluating the charging......This paper explores the characteristic of capacitance versus voltage for dielectric electro active polymer (DEAP) actuator, 2kV polypropylene film capacitor as well as 3kV X7R multi layer ceramic capacitor (MLCC) at the beginning. An energy efficiency for capacitively loaded converters...... efficiency of converter. Based on the capacitancevoltage curve, the correct capacitance should be chosen when calculating the stored energy; otherwise misleading optimistic efficiency can always be obtained. Actually, when DEAP actuator is not available at the early developing stage, the voltage independent...

  17. Ultrasonic Determination Of Recrystallization

    Science.gov (United States)

    Generazio, Edward R.

    1988-01-01

    State of recrystallization identified. Measurement of ultrasonic attenuation shows promise as means of detecting recrystallization in metal. Technique applicable to real-time acoustic monitoring of thermomechanical treatments. Starting with work-hardened material, one ultrasonically determines effect of annealing, using correlation between ultrasonic attenuation and temperature.

  18. Ultrasonic colour Doppler imaging

    DEFF Research Database (Denmark)

    Evans, David H.; Jensen, Jørgen Arendt; Nielsen, Michael Bachmann

    2011-01-01

    Ultrasonic colour Doppler is an imaging technique that combines anatomical information derived using ultrasonic pulse-echo techniques with velocity information derived using ultrasonic Doppler techniques to generate colour-coded maps of tissue velocity superimposed on grey-scale images of tissue ...

  19. Capacitive Position Sensor For Accelerometer

    Science.gov (United States)

    Vanzandt, Thomas R.; Kaiser, William J.; Kenny, Thomas W.

    1995-01-01

    Capacitive position sensor measures displacement of proof mass in prototype accelerometer described in "Single-Crystal Springs for Accelerometers" (NPO-18795). Sensor is ultrasensitive, miniature device operating at ultra-high frequency and described in more detail in "Ultra-High-Frequency Capacitive Displacement Sensor," (NPO-18675). Advances in design and fabrication of prototype accelerometer also applicable to magnetometers and other sensors in which sensed quantities measured in terms of deflections of small springs.

  20. The concept of chemical capacitance, A critique.

    OpenAIRE

    Trissl, H. W.

    1981-01-01

    The concept of chemical capacitance as introduced by Hong and Mauzerall (Proc. Natl. Acad. Sci. U.S.A. 1974. 71:1564) is critically reexamined. This novel capacitance was introduced to explain the time-course of flash-induced photocurrents observed in lipid bilayer membranes containing porphyrins. According to Hong and Mauzerall, the chemical capacitance results from a combination of three fundamental capacitances: the geometric membrane capacitance and the two interfacial double layer capaci...

  1. A batch process micromachined thermoelectric energy harvester: Fabrication and characterization

    NARCIS (Netherlands)

    Su, J.; Leonov, V.; Goedbloed, M.; Andel, Y. van; Nooijer, M.C.de; Elfrink, R.; Wang, Z.; Vullers, R.J.M.

    2010-01-01

    Micromachined thermopiles are considered as a cost-effective solution for energy harvesters working at a small temperature difference and weak heat flows typical for, e.g., the human body. They can be used for powering autonomous wireless sensor nodes in a body area network. In this paper, a microma

  2. Development of a focused ion beam micromachining system

    Energy Technology Data Exchange (ETDEWEB)

    Pellerin, J.G.; Griffis, D.; Russell, P.E.

    1988-12-01

    Focused ion beams are currently being investigated for many submicron fabrication and analytical purposes. An FIB micromachining system consisting of a UHV vacuum system, a liquid metal ion gun, and a control and data acquisition computer has been constructed. This system is being used to develop nanofabrication and nanomachining techniques involving focused ion beams and scanning tunneling microscopes.

  3. Monitoring of yeast cell concentration using a micromachined impedance sensor

    NARCIS (Netherlands)

    Krommenhoek, E.E.; Gardeniers, J.G.E.; Bomer, J.G.; Berg, van den A.; Li, X.; Ottens, M.; Wielen, van der L.A.M.; Dedem, van G.W.K.; Leeuwen, M.; Gulik, van W.M.; Heijnen, J.J.

    2005-01-01

    The paper describes the design, modelling and experimental characterization of a micromachined impedance sensor for on-line monitoring of the viable yeast cell concentration (biomass) in a miniaturized cell assay. Measurements in a Saccharomyces cerevisiae cell culture show that the permittivity of

  4. Dynamics of micromachined vibrating gimbal and wheel gyroscope

    Institute of Scientific and Technical Information of China (English)

    TijingCAI

    2000-01-01

    We deduce dynamic equations of micromachined vibrating gimbal and wheel gyroscope and give an approximate solution of enough accuracy. The comparison between the approximate solution and the solution used often in the literature is given. According to property of the approximate solution a decoupled two-axes gyroscope will be composed of two single-axes gyroscopes.

  5. Bioenergetics of Mammalian Sperm Capacitation

    Directory of Open Access Journals (Sweden)

    Alessandra Ferramosca

    2014-01-01

    Full Text Available After ejaculation, the mammalian male gamete must undergo the capacitation process, which is a prerequisite for egg fertilization. The bioenergetics of sperm capacitation is poorly understood despite its fundamental role in sustaining the biochemical and molecular events occurring during gamete activation. Glycolysis and mitochondrial oxidative phosphorylation (OXPHOS are the two major metabolic pathways producing ATP which is the primary source of energy for spermatozoa. Since recent data suggest that spermatozoa have the ability to use different metabolic substrates, the main aim of this work is to present a broad overview of the current knowledge on the energy-producing metabolic pathways operating inside sperm mitochondria during capacitation in different mammalian species. Metabolism of glucose and of other energetic substrates, such as pyruvate, lactate, and citrate, is critically analyzed. Such knowledge, besides its obvious importance for basic science, could eventually translate into the development of novel strategies for treatment of male infertility, artificial reproduction, and sperm selection methods.

  6. Broadband electrostatic acoustic transducer for ultrasonic measurements in liquids.

    Science.gov (United States)

    Cantrell, J H; Heyman, J S; Yost, W T; Torbett, M A; Breazeale, M A

    1979-01-01

    A broadband capacitive electrostatic acoustic transducer (ESAT) has been developed for use in a liquid environment at megahertz frequencies. The ESAT basically consists of a thin conductive membrane stretched over a metallic housing. The membrane functions as the ground plate of a parallel plate capacitor, the other plate being a dc biased electrode recessed approximately 10 mum from the electrically grounded membrane. An ultrasonic wave incident on the membrane varies the membrane-electrode gap spacing and generates an electrical signal proportional to the wave amplitude. The entire assembly is sealed for immersion in a liquid environment. Calibration of the ESAT with incident ultrasonic waves of constant displacement amplitude from 1 to 15 MHz reveals a decrease in signal response with increasing frequency independent of membrane tension. The use of the ESAT as a broadband ultrasonic transducer in liquids with a predictable frequency response is promising.

  7. Improving capacitance/damping ratio in a capacitive MEMS transducer

    International Nuclear Information System (INIS)

    Damping forces play an important role in capacitive MEMS (microelectromechanical systems) behavior, and typical damper design (parallel-plates) cannot address the design conflict between increase in electrical capacitance and damping reduction. Squeeze-film damping in in-plane parallel-plate MEMS is discussed here and a novel damper geometry for gap-varying parallel-plates is introduced and used to increase the capacitance/damping ratio. The new geometry is compared with a typical parallel-plate design for an silicon-on-insulator process (25 µm thick) and experimental data shows an approximate 25% to 50% reduction for the damping coefficient in structures with 500 µm long dampers (for a gap variation between 0.75 and 3.75 µm), in agreement with computational fluid dynamics simulations, without significantly affecting the capacitance value (∼4% reduction). Preliminary simulations to study the role of the different geometric parameters involved in the improved geometry are also performed and reveal that the channel width is the most critical value for effective damping reduction. (paper)

  8. Electromagnetic ultrasonic guided waves

    CERN Document Server

    Huang, Songling; Li, Weibin; Wang, Qing

    2016-01-01

    This book introduces the fundamental theory of electromagnetic ultrasonic guided waves, together with its applications. It includes the dispersion characteristics and matching theory of guided waves; the mechanism of production and theoretical model of electromagnetic ultrasonic guided waves; the effect mechanism between guided waves and defects; the simulation method for the entire process of electromagnetic ultrasonic guided wave propagation; electromagnetic ultrasonic thickness measurement; pipeline axial guided wave defect detection; and electromagnetic ultrasonic guided wave detection of gas pipeline cracks. This theory and findings on applications draw on the author’s intensive research over the past eight years. The book can be used for nondestructive testing technology and as an engineering reference work. The specific implementation of the electromagnetic ultrasonic guided wave system presented here will also be of value for other nondestructive test developers.

  9. Ultrasonic testing device

    International Nuclear Information System (INIS)

    The ultrasonic transmitter made of polarized ferroelectric ceramic material (lead zirconate titanate) is arranged in a strip carrier which allows it to be introduced between the fuel elements of a fuel subassembly in a water cooled nuclear reactor. The ultrasonic transmitter is insulated relative to the carrier. The echo of the ra dal ultrasonic pulse is recorded which changes as faulty water filled fuel elements are detected. (RW)

  10. Water desalination via capacitive deionization

    NARCIS (Netherlands)

    Suss, M.E.; Porada, S.; Sun, X.; Biesheuvel, P.M.; Yoon, J.; Presser, V.

    2015-01-01

    Capacitive deionization (CDI) is an emerging technology for the facile removal of charged ionic species from aqueous solutions, and is currently being widely explored for water desalination applications. The technology is based on ion electrosorption at the surface of a pair of electrically charg

  11. Driven shielding capacitive proximity sensor

    Science.gov (United States)

    Vranish, John M. (Inventor); McConnell, Robert L. (Inventor)

    2000-01-01

    A capacitive proximity sensing element, backed by a reflector driven at the same voltage as and in phase with the sensor, is used to reflect the field lines away from a grounded robot arm towards an intruding object, thus dramatically increasing the sensor's range and sensitivity.

  12. Voltage Dependence of Supercapacitor Capacitance

    Directory of Open Access Journals (Sweden)

    Szewczyk Arkadiusz

    2016-09-01

    Full Text Available Electronic Double-Layer Capacitors (EDLC, called Supercapacitors (SC, are electronic devices that are capable to store a relatively high amount of energy in a small volume comparing to other types of capacitors. They are composed of an activated carbon layer and electrolyte solution. The charge is stored on electrodes, forming the Helmholtz layer, and in electrolyte. The capacitance of supercapacitor is voltage- dependent. We propose an experimental method, based on monitoring of charging and discharging a supercapacitor, which enables to evaluate the charge in an SC structure as well as the Capacitance-Voltage (C-V dependence. The measurement setup, method and experimental results of charging/discharging commercially available supercapacitors in various voltage and current conditions are presented. The total charge stored in an SC structure is proportional to the square of voltage at SC electrodes while the charge on electrodes increases linearly with the voltage on SC electrodes. The Helmholtz capacitance increases linearly with the voltage bias while a sublinear increase of total capacitance was found. The voltage on SC increases after the discharge of electrodes due to diffusion of charges from the electrolyte to the electrodes. We have found that the recovery voltage value is linearly proportional to the initial bias voltage value.

  13. Artificial intelligence: Collective behaviors of synthetic micromachines

    Science.gov (United States)

    Duan, Wentao

    Synthetic nano- and micromotors function through the conversion of chemical free energy or forms of energy into mechanical motion. Ever since the first reports, such motors have been the subject of growing interest. In addition to motility in response to gradients, these motors interact with each other, resulting in emergent collective behavior like schooling, exclusion, and predator-prey. However, most of these systems only exhibit a single type of collective behavior in response to a certain stimuli. The research projects in the disseratation aim at designing synthetic micromotors that can exhibit transition between various collective behaviors in response to different stimuli, as well as quantitative understanding on the pairwise interaction and propulsion mechanism of such motors. Chapter 1 offers an overview on development of synthetic micromachines. Interactions and collective behaviors of micromotors are also summarized and included. Chapter 2 presents a silver orthophosphate microparticle system that exhibits collective behaviors. Transition between two collective patterns, clustering and dispersion, can be triggered by shift in chemical equilibrium upon the addition or removal of ammonia, in response to UV light, or under two orthogonal stimuli (UV and acoustic field) and powering mechanisms. The transitions can be explained by the self-diffusiophoresis mechanism resulting from either ionic or neutral solute gradients. Potential applications of the reported system in logic gates, microscale pumping, and hierarchical assembly have been demonstrated. Chapter 3 introduces a self-powered oscillatory micromotor system in which active colloids form clusters whose size changes periodically. The system consists of an aqueous suspension of silver orthophosphate particles under UV radiation, in the presence of a mixture of glucose and hydrogen peroxide. The colloid particles first attract with each other to form clusters. After a lag time of around 5min, chemical

  14. Capacitive Proximity Sensor Has Longer Range

    Science.gov (United States)

    Vranish, John M.

    1992-01-01

    Capacitive proximity sensor on robot arm detects nearby object via capacitive effect of object on frequency of oscillator. Sensing element part of oscillator circuit operating at about 20 kHz. Total capacitance between sensing element and ground constitutes tuning capacitance of oscillator. Sensor circuit includes shield driven by replica of alternating voltage applied to sensing element. Driven shield concentrates sensing electrostatic field in exterior region to enhance sensitivity to object. Sensitivity and dynamic range has corresponding 12-to-1 improvement.

  15. A Silicon Micromachined Gyroscope Driven by the Rotating Carrier Self

    Institute of Scientific and Technical Information of China (English)

    Fuxue Zhang; Xu Mao; Yu Liu; Nan Zhang; Wei Zhang

    2006-01-01

    This paper reported a silicon micromachined gyroscope which is driven by the rotating carrier's angular velocity, the silicon was manufactured by anisotropy etching. The design, fabrication and packing of the sensing element were introduced in the paper. The imitation experimentation and performance test have certificated that the principle of the gyroscope is correct and the gyroscope can be used to sense yawing or pitching angular velocity of the rotating carrier, and the angular velocity of the rotating carrier itself.

  16. High-speed Laser Micromachining with Copper Bromide Laser

    CERN Document Server

    Balchev, I I; Minkovski, N I; Sabotinov, N V; Balchev, Ivaylo I.; Kostadinov, Ivan K.; Minkovski, Nikolai I.; Sabotinov, Nikola V.

    2006-01-01

    The application of the copper bromide (CuBr) laser as an attractive tool in the micro-machining of different materials has been demonstrated. High-quality drilling by trepanning and precision cutting was established on several materials with a negligible heat-affected zone (HAZ). That good performance was a result of the combination of high power visible radiation, short pulses, and close to the diffraction-limited laser beam quality with high-speed galvo scanner beam steering.

  17. Active Targets For Capacitive Proximity Sensors

    Science.gov (United States)

    Jenstrom, Del T.; Mcconnell, Robert L.

    1994-01-01

    Lightweight, low-power active targets devised for use with improved capacitive proximity sensors described in "Capacitive Proximity Sensor Has Longer Range" (GSC-13377), and "Capacitive Proximity Sensors With Additional Driven Shields" (GSC-13475). Active targets are short-distance electrostatic beacons; they generate known alternating electro-static fields used for alignment and/or to measure distances.

  18. Micromachined nanofiltration modules for lab-on-a-chip applications

    International Nuclear Information System (INIS)

    In this paper, we present a new concept of particle filtration modules for lab-on-a-chip (LOC) devices. The modules are designed as vertical walls that separate fluidic micro channels. In these walls, nano channels that connect the two adjacent micro channels are embedded. Fluid and small particles can penetrate the walls through the embedded nano channels, while particles larger than the nano channels size will be stopped. By keeping the fluid in the surface plane of the LOC, the module can be easily integrated with other LOC modules. To fabricate these modules, we use chemical vapor deposition to deposit nanometer thick sacrificial layers and embed them into the wall structure. Wet chemical enchants are used to remove the sacrificial layers and form the nano channels. This fabrication process can generate 100 nm−1 μm high nano channels with high accuracy and uniformity with well-established micromachining techniques. Two types of modules, surface micromachining design for more flexibility in the choice of substrate material and bulk micromachining design for higher porosity without increasing footprint, are fabricated and successfully tested. (paper)

  19. Micromachined nanofiltration modules for lab-on-a-chip applications

    Science.gov (United States)

    Shen, C.; Mokkapati, V. R. S. S.; Pham, H. T. M.; Sarro, P. M.

    2012-02-01

    In this paper, we present a new concept of particle filtration modules for lab-on-a-chip (LOC) devices. The modules are designed as vertical walls that separate fluidic micro channels. In these walls, nano channels that connect the two adjacent micro channels are embedded. Fluid and small particles can penetrate the walls through the embedded nano channels, while particles larger than the nano channels size will be stopped. By keeping the fluid in the surface plane of the LOC, the module can be easily integrated with other LOC modules. To fabricate these modules, we use chemical vapor deposition to deposit nanometer thick sacrificial layers and embed them into the wall structure. Wet chemical enchants are used to remove the sacrificial layers and form the nano channels. This fabrication process can generate 100 nm-1 μm high nano channels with high accuracy and uniformity with well-established micromachining techniques. Two types of modules, surface micromachining design for more flexibility in the choice of substrate material and bulk micromachining design for higher porosity without increasing footprint, are fabricated and successfully tested.

  20. Micromachining of polydimethylsiloxane induced by laser plasma EUV light

    Science.gov (United States)

    Torii, S.; Makimura, T.; Okazaki, K.; Nakamura, D.; Takahashi, A.; Okada, T.; Niino, H.; Murakami, K.

    2011-06-01

    Polydimethylsiloxane (PDMS) is fundamental materials in the field of biotechnology. Because of its biocompatibility, microfabricated PDMS sheets are applied to micro-reactors and microchips for cell culture. Conventionally, the microstructures were fabricated by means of cast or imprint using molds, however it is difficult to fabricate the structures at high aspect ratios such as through-holes/vertical channels. The fabrication of the high-aspect structures would enable us to stack sheets to realize 3D fluidic circuits. In order to achieve the micromachining, direct photo-ablation by short wavelength light is promising. In the previous works, we investigated ablation of transparent materials such as silica glass and poly(methyl methacrylate) induced by irradiation with laser plasma EUV light. We achieved smooth and fine nanomachining. In this work, we applied our technique to PDMS micromachining. We condensed the EUV light onto PDMS surfaces at high power density up to 108 W/cm2 using a Au coated ellipsoidal mirror. We found that PDMS sheet was ablated at a rate up to 440 nm/shot. It should be emphasized that through hole with a diameter of 1 μm was fabricated in a PDMS sheet with a thickness of 4 μm. Thus we demonstrated the micromachining of PDMS sheets using laser plasma EUV light.

  1. Effects of stray capacitance to ground in bipolar water impedance measurements based on capacitive electrodes

    OpenAIRE

    Pallàs Areny, Ramon; Aliau Bonet, Carles

    2015-01-01

    Liquid impedance measurements based on capacitive (or contactless) electrodes Overcome electrode polarization problems but are affected by stray capacitance from the material being measured to ground, the same as measurements with direct-contact electrodes. This study shows that the effects of that capacitance depend on the impedance being measured and for bipolar impedance measurements they increase when the ratio between that stray capacitance and lectrode capacitance increases.

  2. Laser Micromachining and Information Discovery Using a Dual Beam Interferometry

    Energy Technology Data Exchange (ETDEWEB)

    Senthil P. Theppakuttaikomaraswamy

    2001-12-31

    Lasers have proven to be among the most promising tools for micromachining because they can process features down to the size of the laser wavelength (smaller than 1 micrometer) and they provide a non-contact technology for machining. The demand for incorporating in-situ diagnostics technology into the micromachining environment is driven by the increasing need for producing micro-parts of high quality and accuracy. Laser interferometry can be used as an on-line monitoring tool and it is the aim of this work to enhance the understanding and application of Michelson interferometry principle for the in-situ diagnostics of the machining depth on the sub-micron and micron scales. micromachining is done on two different materials and a comprehensive investigation is done to control the width and depth of the machined feature. To control the width of the feature, laser micromachining is done on copper and a detailed analysis is performed. The objective of this experiment is to make a precision mask for sputtering with an array of holes on it using an Nd:YAG laser of 532 nm wavelength. The diameter of the hole is 50 {micro}m and the spacing between holes (the distance between the centers) is 100 {micro}m. Michelson interferometer is integrated with a laser machining system to control the depth of machining. An excimer laser of 308 nm wavelength is used for micromachining. A He-Ne laser of 632.8 nm wavelength is used as the light source for the interferometer. Interference patterns are created due to the change in the path length between the two interferometer arms. The machined depth information is obtained from the interference patterns on an oscilloscope detected by a photodiode. To compare the predicted depth by the interferometer with the true machining depth, a surface profilometer is used to measure the actual machining depth on the silicon. It is observed that the depths of machining obtained by the surface profile measurement are in accordance with the

  3. Ultrasonic assisted-ECAP.

    Science.gov (United States)

    Djavanroodi, F; Ahmadian, H; Koohkan, K; Naseri, R

    2013-08-01

    Equal channel angular pressing (ECAP) is one of the most prominent procedures for achieving ultra-fine grain (UFG) structures among the various severe plastic deformation (SPD) techniques. In this study, the effect of ultrasonic vibration on deformation behavior of commercial pure aluminum in the ECAP process is analyzed successfully using three dimensional (3D) by finite element methods (FEMs). The investigation includes the effects of die geometry, billet length, friction factor, ram speed, ultrasonic amplitude and ultrasonic frequency. Conventional as well as ultrasonic ECAP has been performed on aluminium 1070 alloy and the obtained data were used for validating simulations. It is observed that a 13% reduction in the average force was achieved when ultrasonic vibration with amplitude of 2.5 μm at 20 kHz is applied. Also, further reduction in ECAP forming forces are obtained with increase of vibration amplitude, vibration frequency, friction factor, billet length and die channel angle. PMID:23523093

  4. Ultrasonic assisted-ECAP.

    Science.gov (United States)

    Djavanroodi, F; Ahmadian, H; Koohkan, K; Naseri, R

    2013-08-01

    Equal channel angular pressing (ECAP) is one of the most prominent procedures for achieving ultra-fine grain (UFG) structures among the various severe plastic deformation (SPD) techniques. In this study, the effect of ultrasonic vibration on deformation behavior of commercial pure aluminum in the ECAP process is analyzed successfully using three dimensional (3D) by finite element methods (FEMs). The investigation includes the effects of die geometry, billet length, friction factor, ram speed, ultrasonic amplitude and ultrasonic frequency. Conventional as well as ultrasonic ECAP has been performed on aluminium 1070 alloy and the obtained data were used for validating simulations. It is observed that a 13% reduction in the average force was achieved when ultrasonic vibration with amplitude of 2.5 μm at 20 kHz is applied. Also, further reduction in ECAP forming forces are obtained with increase of vibration amplitude, vibration frequency, friction factor, billet length and die channel angle.

  5. Full-bridge capacitive extensometer

    Science.gov (United States)

    Peters, Randall D.

    1993-08-01

    Capacitive transducers have proven to be very effective sensors of small displacements, because of inherent stability and noninvasive high resolution. The most versatile ones have been those of a differential type, in which two elements are altered in opposite directions in response to change of the system parameter being monitored. Oftentimes, this differential pair has been incorporated into a bridge circuit, which is a useful means for employing synchronous detection to improve signal to noise ratios. Unlike previous differential capacitive dilatometers which used only two active capacitors, the present sensor is a full-bridge type, which is well suited to measuring low-level thermal expansions. This analog sensor is capable of 0.1 μm resolution anywhere within a range of several centimeters, with a linearity of 0.1%. Its user friendly output can be put on a strip chart recorder or directed to a computer for sophisticated data analysis.

  6. Quantum capacitance in topological insulators.

    Science.gov (United States)

    Xiu, Faxian; Meyer, Nicholas; Kou, Xufeng; He, Liang; Lang, Murong; Wang, Yong; Yu, Xinxin; Fedorov, Alexei V; Zou, Jin; Wang, Kang L

    2012-01-01

    Topological insulators show unique properties resulting from massless, Dirac-like surface states that are protected by time-reversal symmetry. Theory predicts that the surface states exhibit a quantum spin Hall effect with counter-propagating electrons carrying opposite spins in the absence of an external magnetic field. However, to date, the revelation of these states through conventional transport measurements remains a significant challenge owing to the predominance of bulk carriers. Here, we report on an experimental observation of Shubnikov-de Haas oscillations in quantum capacitance measurements, which originate from topological helical states. Unlike the traditional transport approach, the quantum capacitance measurements are remarkably alleviated from bulk interference at high excitation frequencies, thus enabling a distinction between the surface and bulk. We also demonstrate easy access to the surface states at relatively high temperatures up to 60 K. Our approach may eventually facilitate an exciting exploration of exotic topological properties at room temperature.

  7. Water desalination via capacitive deionization

    OpenAIRE

    Suss, M. E.; Porada, S.; Sun, X.; Biesheuvel, P. M.; Yoon, J.; Presser, V.

    2015-01-01

    Capacitive deionization (CDI) is an emerging technology for the facile removal of charged ionic species from aqueous solutions, and is currently being widely explored for water desalination applications. The technology is based on ion electrosorption at the surface of a pair of electrically charged electrodes, commonly composed of highly porous carbon materials. The CDI community has grown exponentially over the past decade, driving tremendous advances via new cell architectures and system de...

  8. Capacitive de-ionization electrode

    Energy Technology Data Exchange (ETDEWEB)

    Daily, III, William D.

    2013-03-19

    An electrode "cell" for use in a capacitive deionization (CDI) reactor consists of the electrode support structure, a non-reactive conductive material, the electrode accompaniment or substrate and a flow through screen/separator. These "layers" are repeated and the electrodes are sealed together with gaskets between two end plates to create stacked sets of alternating anode and cathode electrodes in the CDI reactor.

  9. Characterization of a bulk-micromachined membraneless in-plane thermopile

    NARCIS (Netherlands)

    Wang, Z.; Andel, Y. van; Jambunathan, M.; Leonov, V.; Elfrink, R.; Vullers, R.J.M.

    2011-01-01

    This paper describes the characterization method and results for bulk- micromachined in-plane thermopiles. Made of poly-Si or poly-SiGe, the thermocouple legs bridge the hot and cold side of a Si frame, which is formed by bulk micromachining. The characterization of the fabricated devices is carried

  10. Ultrasonic materials characterization

    Science.gov (United States)

    Smith, R. L.

    1987-02-01

    The National NDT Center at Harwell has been developing methods for the characterization of materials using ultrasonics. This paper reviews the progress made in applying ultrasonic attenuation measurements to the determination of such quantities as grain size and dislocation content. A method, ultrasonic attenuation spectral analysis, has been developed, which enables the contributions of scattering and absorption to the total attenuation to be separated. The theoretical advances that have been made are also described. Some of the practical applications of the technique are illustrated and future development discussed.

  11. Ultrasonic liquid level detector

    Science.gov (United States)

    Kotz, Dennis M.; Hinz, William R.

    2010-09-28

    An ultrasonic liquid level detector for use within a shielded container, the detector being tubular in shape with a chamber at its lower end into which liquid from in the container may enter and exit, the chamber having an ultrasonic transmitter and receiver in its top wall and a reflector plate or target as its bottom wall whereby when liquid fills the chamber a complete medium is then present through which an ultrasonic wave may be transmitted and reflected from the target thus signaling that the liquid is at chamber level.

  12. Redox regulation of mammalian sperm capacitation

    Directory of Open Access Journals (Sweden)

    Cristian O′Flaherty

    2015-01-01

    Full Text Available Capacitation is a series of morphological and metabolic changes necessary for the spermatozoon to achieve fertilizing ability. One of the earlier happenings during mammalian sperm capacitation is the production of reactive oxygen species (ROS that will trigger and regulate a series of events including protein phosphorylation, in a time-dependent fashion. The identity of the sperm oxidase responsible for the production of ROS involved in capacitation is still elusive, and several candidates are discussed in this review. Interestingly, ROS-induced ROS formation has been described during human sperm capacitation. Redox signaling during capacitation is associated with changes in thiol groups of proteins located on the plasma membrane and subcellular compartments of the spermatozoon. Both, oxidation of thiols forming disulfide bridges and the increase on thiol content are necessary to regulate different sperm proteins associated with capacitation. Reducing equivalents such as NADH and NADPH are necessary to support capacitation in many species including humans. Lactate dehydrogenase, glucose-6-phospohate dehydrogenase, and isocitrate dehydrogenase are responsible in supplying NAD (P H for sperm capacitation. Peroxiredoxins (PRDXs are newly described enzymes with antioxidant properties that can protect mammalian spermatozoa; however, they are also candidates for assuring the regulation of redox signaling required for sperm capacitation. The dysregulation of PRDXs and of enzymes needed for their reactivation such as thioredoxin/thioredoxin reductase system and glutathione-S-transferases impairs sperm motility, capacitation, and promotes DNA damage in spermatozoa leading to male infertility.

  13. An approach to evaluate capacitance, capacitive reactance and resistance of pivoted pads of a thrust bearing

    Science.gov (United States)

    Prashad, Har

    1992-07-01

    A theoretical approach is developed for determining the capacitance and active resistance between the interacting surfaces of pivoted pads and thrust collar, under different conditions of operation. It is shown that resistance and capacitive reactance of a thrust bearing decrease with the number of pads times the values of these parameters for an individual pad, and that capacitance increases with the number of pads times the capacitance of an individual pad. The analysis presented has a potential to diagnose the behavior of pivoted pad thrust bearings with the angle of tilt and the ratio of film thickness at the leading to trailing edge, by determining the variation of capacitance, resistance, and capacitive reactance.

  14. Integrated micromachined transmission lines and endfire slotline antennas

    Science.gov (United States)

    Gearhart, Steven S.; Willke, Theodore L.; Onggosanusi, Eko N.

    1997-09-01

    An entirely new class of micromachined 3D microwave and millimeter-wave integrated circuits and antennas are being developed at the University of Wisconsin-Madison using a subset o the LIGA micromachining process. The deep x-ray lithography and metal plating portions of the LIGA process are used to precisely form tall metal structures on semiconductor and dielectric substrates. This micromachining process allows metal height to be included as a parameter in the design of integrated circuits, which will permit several important advancements in high frequency waveguiding circuits and integrated antennas. With appropriate thick- metal cross-sectional geometry, transmission line losses and dispersion may both be reduced on a given substrate. Vertical-walled metal structures allow increased control over element-to-element coupling for integrated coupled-line filters and couplers and result in very significant reductions in ohmic loss. It will be demonstrated that the first single-level coupled-line 3dB coupler can be fabricated using the LIGA process. In addition, the mechanical properties of the thick metal structures will be utilized in the fabrication of integrated antennas and transmission lines that are unsupported by a dielectric substrate. The elimination of the substrate beneath antennas reduces losses to substrate modes, and the elimination o the substrate beneath transmission line filters is necessary for extremely high Q integrated filters. This paper will present simulated loss results that demonstrate the advantages of thick metal transmission lines, measured results of a coupled-line bandpass filter, and a recently fabricated thick-metal tapered slotline antenna which extends nearly a centimeter off of the edge of a GaAs wafer.

  15. Proton beam micromachining on PMMA, Foturan and CR-39 materials

    CERN Document Server

    Rajta, I; Kiss, A Z; Gomez-Morilla, I; Abraham, M H

    2003-01-01

    Proton Beam Micromachining was demonstrated at the Institute of Nuclear Research of the Hungarian Academy of Sciences using three different types of resists: PMMA, Foturan and CR-39 type Solid State Nuclear Track Detector material. Irradiations have been performed on the nuclear microprobe facility at ATOMKI. The beam scanning was done using a National Instruments (NI) card (model 6711), and the new C++ version of the program IonScan, developed specifically for PBM applications called IonScan 2.0. (R.P.)

  16. Electrochemical mechanical micromachining based on confined etchant layer technique.

    Science.gov (United States)

    Yuan, Ye; Han, Lianhuan; Zhang, Jie; Jia, Jingchun; Zhao, Xuesen; Cao, Yongzhi; Hu, Zhenjiang; Yan, Yongda; Dong, Shen; Tian, Zhong-Qun; Tian, Zhao-Wu; Zhan, Dongping

    2013-01-01

    The confined etchant layertechnique (CELT) has been proved an effective electrochemical microfabrication method since its first publication at Faraday Discussions in 1992. Recently, we have developed CELT as an electrochemical mechanical micromachining (ECMM) method by replacing the cutting tool used in conventional mechanical machining with an electrode, which can perform lathing, planing and polishing. Through the coupling between the electrochemically induced chemical etching processes and mechanical motion, ECMM can also obtain a regular surface in one step. Taking advantage of CELT, machining tolerance and surface roughness can reach micro- or nano-meter scale.

  17. DNA transport by a micromachined Brownian ratchet device

    CERN Document Server

    Bader, J S; Henck, S A; Deem, M W; McDermott, G A; Bustillo, J M; Simpson, J W; Mulhern, G T; Rothberg, J M; Bader, Joel S; Hammond, Richard W.; Henck, Steven A.; Deem, Michael W.; Dermott, Gregory A. Mc; Bustillo, James M.; Simpson, John W.; Mulhern, Gregory T.; Rothberg, Jonathan M.

    1999-01-01

    We have micromachined a silicon-chip device that transports DNA with aBrownian ratchet that rectifies the Brownian motion of microscopic particles.Transport properties for a DNA 50mer agree with theoretical predictions, andthe DNA diffusion constant agrees with previous experiments. This type ofmicromachine could provide a generic pump or separation component for DNA orother charged species as part of a microscale lab-on-a-chip. A device withreduced feature size could produce a size-based separation of DNA molecules,with applications including the detection of single nucleotide polymorphisms.

  18. Sub-band-gap laser micromachining of lithium niobate

    DEFF Research Database (Denmark)

    Christensen, F. K.; Müllenborn, Matthias

    1995-01-01

    Laser processing of insulators and semiconductors is usually realized using photon energies exceeding the band-gap energy. This makes laser processing of insulators difficult since high photon energies typically require either a pulsed laser or a frequency-doubled continuous-wave laser. A new...... method is reported which enables us to do laser processing of lithium niobate using sub-band-gap photons. Using high scan speeds, moderate power densities, and sub-band-gap photon energies results in volume removal rates in excess of 106µm3/s. This enables fast micromachining of small piezoelectric...

  19. A broadband micro-machined far-infrared absorber

    Science.gov (United States)

    Wollack, E. J.; Datesman, A. M.; Jhabvala, C. A.; Miller, K. H.; Quijada, M. A.

    2016-05-01

    The experimental investigation of a broadband far-infrared meta-material absorber is described. The observed absorptance is >0.95 from 1 to 20 THz (300-15 μm) over a temperature range spanning 5-300 K. The meta-material, realized from an array of tapers ≈100 μm in length, is largely insensitive to the detailed geometry of these elements and is cryogenically compatible with silicon-based micro-machined technologies. The electromagnetic response is in general agreement with a physically motivated transmission line model.

  20. A beam-membrane structure micromachined differential pressure flow sensor.

    Science.gov (United States)

    Chen, P; Zhao, Y L; Tian, B; Li, C; Li, Y Y

    2015-04-01

    A beam-membrane structure micromachined flow sensor is designed, depending on the principle of differential pressure caused by the mass flow, which is directly proportional to the square flow rate. The FSI (fluid structure interaction) characteristics of the differential pressure flow sensor are investigated via numerical analysis and analog simulation. The working mechanism of the flow sensor is analyzed depending on the FSI results. Then, the flow sensor is fabricated and calibrated. The calibration results show that the beam-membrane structure differential pressure flow sensor achieves ideal static characteristics and works well in the practical applications.

  1. A Broadband Micro-machined Far-Infrared Absorber

    CERN Document Server

    Wollack, Edward J; Jhabvala, Christine A; Miller, Kevin H; Quijada, Manuel A

    2016-01-01

    The experimental investigation of a broadband far-infrared meta-material absorber is described. The observed absorptance is $>\\,0.95$ from ${\\rm 1-20\\,THz}$ (${\\rm 300-15\\,\\mu m}$) over a temperature range spanning ${\\rm 5-300\\,K}$. The meta-material, realized from an array of tapers ${\\rm \\approx 100\\,\\mu m}$ in length, is largely insensitive to the detailed geometry of these elements and is cryogenically compatible with silicon-based micro-machined technologies. The electromagnetic response is in general agreement with a physically motivated transmission line model.

  2. Response of piezoelectric laminated micro plates under the excitation of an ultrasonic wave

    Science.gov (United States)

    Kang, Xin; Dong, Shuai

    2016-01-01

    This study presents the electromechanical response of a piezoelectric laminated micro plate under the excitation of an ultrasonic wave. The laminated plate consists of a piezoelectric layer (AlN), an elastic layer (SiO2) and two electrode layers (Au and Pt). Since the whole thickness of the plate is in micro scale, the size dependence of the dynamic behavior of the laminated plate is evaluated using the couple stress theory. The results show that the bending rigidity of the micro plate increases when the size effect is considered and the amplitudes of output of electric charge and voltage are reduced accordingly when the plate is excited by ultrasonic wave. Also the resonant frequency of the laminated plate increase because of the enhancement of the bending rigidity of the plate. The analysis results can provide a reference for the design of micromachined piezoelectric sensors.

  3. Fundamentals of Medical Ultrasonics

    CERN Document Server

    Postema, Michiel

    2011-01-01

    This book sets out the physical and engineering principles of acoustics and ultrasound as used for medical applications. It covers the basics of linear acoustics, wave propagation, non-linear acoustics, acoustic properties of tissue, transducer components, and ultrasonic imaging modes, as well as the most common diagnostic and therapeutic applications. It offers students and professionals in medical physics and engineering a detailed overview of the technical aspects of medical ultrasonic imaging, whilst serving as a reference for clinical and research staff.

  4. Metalworking with ultrasonic energy

    Science.gov (United States)

    Sonea, I.; Minca, M.

    1974-01-01

    The application of ultrasonic radiation for metal working of steel is discussed. It is stated that the productivity of the ultrasonic working is affected by the hardness of the material to be worked, the oscillation amplitude, the abrasive temperature, and the grain size. The factors that contribute to an increase in the dislocation speed are analyzed. Experimental data are provided to substantiate the theoretical parameters.

  5. Flexible PVDF ferroelectric capacitive temperature sensor

    KAUST Repository

    Khan, Naveed

    2015-08-02

    In this paper, a capacitive temperature sensor based on polyvinylidene fluoride (PVDF) capacitor is explored. The PVDF capacitor is characterized below its Curie temperature. The capacitance of the PVDF capacitor changes vs temperature with a sensitivity of 16pF/°C. The linearity measurement of the capacitance-temperature relation shows less than 0.7°C error from a best fit straight line. An LC oscillator based temperature sensor is demonstrated based on this capacitor.

  6. Nucleotide Capacitance Calculation for DNA Sequencing

    OpenAIRE

    Lu, Jun-Qiang; Zhang, X.-G.

    2008-01-01

    Using a first-principles linear response theory, the capacitance of the DNA nucleotides, adenine, cytosine, guanine, and thymine, are calculated. The difference in the capacitance between the nucleotides is studied with respect to conformational distortion. The result suggests that although an alternate current capacitance measurement of a single-stranded DNA chain threaded through a nanogap electrode may not be sufficient to be used as a standalone method for rapid DNA sequencing, the capaci...

  7. Electrical Capacitance Volume Tomography: Design and Applications

    OpenAIRE

    Warsito Warsito; Liang-Shih Fan; Qussai Marashdeh; Fei Wang

    2010-01-01

    This article reports recent advances and progress in the field of electrical capacitance volume tomography (ECVT). ECVT, developed from the two-dimensional electrical capacitance tomography (ECT), is a promising non-intrusive imaging technology that can provide real-time three-dimensional images of the sensing domain. Images are reconstructed from capacitance measurements acquired by electrodes placed on the outside boundary of the testing vessel. In this article, a review of progress on capa...

  8. Electrochemical capacitance of a leaky nanocapacitor

    OpenAIRE

    Zhao, X; Guo, H; Wang, J.

    1999-01-01

    We report a detailed theoretical investigation on electrochemical capacitance of a nanoscale capacitor where there is a DC coupling between the two conductors. For this ``leaky'' quantum capacitor, we have derived general analytic expressions of the linear and second order nonlinear electrochemical capacitance within a first principles quantum theory in the discrete potential approximation. Linear and nonlinear capacitance coefficients are also derived in a self-consistent manner without the ...

  9. Dual Cryogenic Capacitive Density Sensor

    Science.gov (United States)

    Youngquist, Robert; Mata, Carlos; Vokrot, Peter; Cox, Robert

    2009-01-01

    A dual cryogenic capacitive density sensor has been developed. The device contains capacitive sensors that monitor two-phase cryogenic flow density to within 1% accuracy, which, if temperature were known, could be used to determine the ratio of liquid to gas in the line. Two of these density sensors, located a known distance apart, comprise the sensor, providing some information on the velocity of the flow. This sensor was constructed as a proposed mass flowmeter with high data acquisition rates. Without moving parts, this device is capable of detecting the density change within a two-phase cryogenic flow more than 100 times a second. Detection is enabled by a series of two sets of five parallel plates with stainless steel, cryogenically rated tubing. The parallel plates form the two capacitive sensors, which are measured by electrically isolated digital electronics. These capacitors monitor the dielectric of the flow essentially the density of the flow and can be used to determine (along with temperature) the ratio of cryogenic liquid to gas. Combining this information with the velocity of the flow can, with care, be used to approximate the total two-phase mass flow. The sensor can be operated at moderately high pressures and can be lowered into a cryogenic bath. The electronics have been substantially improved over the older sensors, incorporating a better microprocessor, elaborate ground loop protection and noise limiting circuitry, and reduced temperature sensitivity. At the time of this writing, this design has been bench tested at room temperature, but actual cryogenic tests are pending

  10. Capacitance enhancement via electrode patterning.

    Science.gov (United States)

    Ho, Tuan A; Striolo, Alberto

    2013-11-28

    The necessity of increasing the energy density in electric double layer capacitors to meet current demand is fueling fundamental and applied research alike. We report here molecular dynamics simulation results for aqueous electrolytes near model electrodes. Particular focus is on the effect of electrode patterning on the structure of interfacial electrolytes, and on the potential drop between the solid electrodes and the bulk electrolytes. The latter is estimated by numerically integrating the Poisson equation using the charge densities due to water and ions accumulated near the interface as input. We considered uniform and patterned electrodes, both positively and negatively charged. The uniformly charged electrodes are modeled as graphite. The patterned ones are obtained by removing carbon atoms from the top-most graphene layer, yielding nanoscopic squares and stripes patterns. For simplicity, the patterned electrodes are effectively simulated as insulators (the charge remains localized on the top-most layer of carbon atoms). Our simulations show that the patterns alter the structure of water and the accumulation of ions at the liquid-solid interfaces. Using aqueous NaCl solutions, we found that while the capacitance calculated for three positively charged electrodes did not change much, that calculated for the negatively charged electrodes significantly increased upon patterning. We find that both water structure and orientation, as well as ion accumulation affect the capacitance. As electrode patterning affects differently water structure and ion accumulation, it might be possible to observe ion-specific effects. These results could be useful for advancing our understanding of electric double layer capacitors, capacitive desalination processes, as well as of fundamental interfacial electrolytes properties. PMID:24289370

  11. ULTRASONIC ASSEMBLY [REVIEW

    Directory of Open Access Journals (Sweden)

    PORAV Viorica

    2015-05-01

    Full Text Available The paper exposes the possibility of machine producesers to optimize the costs of clothes assembling. Ultrasonic systems being frequently utilized have many advantages on semi products of synthetic textile and technical textile. First of all, sewing – cutting process can be accomplished under high speeds and rate of losses can be minimized. Cutting seal applications are frequently used for underwear and sportswear. Slicing and unit cutting machines, as well as portable sealing machines are available for labeling sector. Products such as bag, pocket and cover can be sewed in a seamless manner for promotion purposes. All objects in terms of accessories are obtained in same standard. Our quilting machines are preferred in worldwide due to its threadless, high quality sealing. An alternative to the classic sewing assembly, with thread and needles is ultrasonic seaming. In ultrasonic welding, there are no connective bolts, nails, soldering materials, or adhesives necessary to bind the materials together. Ultrasonic is defined as acoustic frequencies above the range audible to the human ear. Ultrasonic frequencies are administered to the fabric from the sonotrode of bonding machine. The high frequency and powerful energy produced, when is release in one special environment, the ultrasound heating this environment. The ability to ultrasonic weld textiles and films depend on their thermoplastic contents and the desired end results. The paper defines the weld ability of more common textiles and films. The welding refers to all types of bonding and sealing, as in point bonding of fabric, or continuous sealing of film.

  12. Detection of Telomerase Activity Using Capacitance Measurements

    Science.gov (United States)

    Kang, Bong Keun; Lee, Ri Mi; Choi, Ahmi; Jung, Hyo-Il; Yoo, Kyung-Hwa

    2007-03-01

    Telomerase activity has been found in about 85% cancer cells, while no activity observed in normal cells, so that telomerase has been proposed as a marker for cancer detection. Here, we describe electrical detection of telomerase activity using capacitance measurements. We have investigated the length dependence of capacitance on DNA solutions and found that the capacitance of DNA solutions were dependent on the DNA length. In addition, upon adding telomerase into the solution of telomeric substrate primer, the capacitance was observed to change as a function of time due to the telomeric elongation. These results suggest that this novel nanosensor may be used for rapid detection of telomerase activity.

  13. Module Eleven: Capacitance; Basic Electricity and Electronics Individualized Learning System.

    Science.gov (United States)

    Bureau of Naval Personnel, Washington, DC.

    In this module the student will learn about another circuit quantity, capacitance, and discover the effects of this component on circuit current, voltage, and power. The module is divided into seven lessons: the capacitor, theory of capacitance, total capacitance, RC (resistive-capacitive circuit) time constant, capacitive reactance, phase and…

  14. Laser micromachining of biofactory-on-a-chip devices

    Science.gov (United States)

    Burt, Julian P.; Goater, Andrew D.; Hayden, Christopher J.; Tame, John A.

    2002-06-01

    Excimer laser micromachining provides a flexible means for the manufacture and rapid prototyping of miniaturized systems such as Biofactory-on-a-Chip devices. Biofactories are miniaturized diagnostic devices capable of characterizing, manipulating, separating and sorting suspension of particles such as biological cells. Such systems operate by exploiting the electrical properties of microparticles and controlling particle movement in AC non- uniform stationary and moving electric fields. Applications of Biofactory devices are diverse and include, among others, the healthcare, pharmaceutical, chemical processing, environmental monitoring and food diagnostic markets. To achieve such characterization and separation, Biofactory devices employ laboratory-on-a-chip type components such as complex multilayer microelectrode arrays, microfluidic channels, manifold systems and on-chip detection systems. Here we discuss the manufacturing requirements of Biofactory devices and describe the use of different excimer laser micromachined methods both in stand-alone processes and also in conjunction with conventional fabrication processes such as photolithography and thermal molding. Particular attention is given to the production of large area multilayer microelectrode arrays and the manufacture of complex cross-section microfluidic channel systems for use in simple distribution and device interfacing.

  15. Hybrid micromachining using a nanosecond pulsed laser and micro EDM

    International Nuclear Information System (INIS)

    Micro electrical discharge machining (micro EDM) is a well-known precise machining process that achieves micro structures of excellent quality for any conductive material. However, the slow machining speed and high tool wear are main drawbacks of this process. Though the use of deionized water instead of kerosene as a dielectric fluid can reduce the tool wear and increase the machine speed, the material removal rate (MRR) is still low. In contrast, laser ablation using a nanosecond pulsed laser is a fast and non-wear machining process but achieves micro figures of rather low quality. Therefore, the integration of these two processes can overcome the respective disadvantages. This paper reports a hybrid process of a nanosecond pulsed laser and micro EDM for micromachining. A novel hybrid micromachining system that combines the two discrete machining processes is introduced. Then, the feasibility and characteristics of the hybrid machining process are investigated compared to conventional EDM and laser ablation. It is verified experimentally that the machining time can be effectively reduced in both EDM drilling and milling by rapid laser pre-machining prior to micro EDM. Finally, some examples of complicated 3D micro structures fabricated by the hybrid process are shown

  16. Microscopic View of Soil on a Micromachined Silicone Substrate

    Science.gov (United States)

    2008-01-01

    This image taken by the Optical Microscope on NASA's Phoenix Mars Lander on Sol 17 (June 11, 2008) shows soil sprinkled from the lander's Robot Arm scoop onto a substrate that has been micromachined to produce different patterns of pegs and holes to capture the smallest particles in the Martian soil. The micromachined substrates are designed to tightly hold particles for imaging using the Atomic Force Microscope on Phoenix, which should be able to zoom in another 40 times beyond the magnification in this Optical Microscope image. Each stripe has a different spacing of pegs and holes. The strip third from the left, with a peg spacing of 5 micrometers, has been most successful in collecting the particles. These substrates were fabricated by Imperial College London as the United Kingdom hardware contribution to the Phoenix mission. For scale, each strip is 0.4 millimeter (0.016 inch) wide. The Phoenix Mission is led by the University of Arizona, Tucson, on behalf of NASA. Project management of the mission is by NASA's Jet Propulsion Laboratory, Pasadena, Calif. Spacecraft development is by Lockheed Martin Space Systems, Denver.

  17. Micromachined array-type Mirau interferometer for MEMS metrology

    Science.gov (United States)

    Gorecki, C.; Bargiel, S.; Albero, J.; Passilly, N.; Kujawinska, M.; Zeitner, U. D.

    We present the development of an array-type micromachined Mirau interferometers, operating in the regime of low coherence interferometry (LCI) and adapted for massively parallel inspection of MEMS. The system is a combination of free-space microoptical technologies and silicon micromachining, based on the vertical assembly of two glass wafers. The probing wafer is carrying an array of refractive microlenses, diffractive gratings to correct chromatic and spherical aberrations and reference micro-mirrors. The semitransparent beam splitter plate is based on the deposition of a dielectric multilayer, sandwiched between two glass wafers. The interferometer matrix is the key element of a novel inspection system aimed to perform parallel inspection of MEMS. The fabricated demonstrator, including 5x5 channels, allows consequently decreasing the measurement time by a factor of 25. In the following, the details of fabrication processes of the micro-optical components and their assembly are described. The feasibility of the LCI is demonstrated for the measurement of a wafer of MEMS sensors.

  18. Capacitance Measurement with a Sigma Delta Converter for 3D Electrical Capacitance Tomography

    Science.gov (United States)

    Nurge, Mark

    2005-01-01

    This paper will explore suitability of a newly available capacitance to digital converter for use in a 3D Electrical Capacitance Tomography system. A switch design is presented along with circuitry needed to extend the range of the capacitance to digital converter. Results are then discussed for a 15+ hour drift and noise test.

  19. Effect of Additive Agent on the Electrochemical Capacitance of Activated Carbon

    Institute of Scientific and Technical Information of China (English)

    Wang Gui-Xin; Qu Mei-Zhen; Chen Li; Wang Guo-Ping; Zhang Qing-Tang; Yu Zuo-Long

    2004-01-01

    In order to compare the effect of additive agent on the electrochemical capacitance of activated carbon, three additive agents like carbon nanotubes (CNTs), activated carbon fibre (ACF)and acetylene black (AB) were added to activated carbon by ultrasonic dispersion. Two electrodes including 95wt.% activated carbon, 2wt.% additive agent and 3wt.% PTFE binder were prepared.Ecs were assembled in an argon-filled glove box by sandwiching a microporous separator (Celgard 2400) between two electrodes. 1.0 M LiClO4/ethylene carbonate (EC)-diethyl carbonate (DEC) (1:1in vol.) was used as the electrolyte. The performance of the Ecs was tested with constant current charge-discharge model between 0.0 and 3.0V at 298K using a battery-testing instrument under the same conditions.From the Fig. 1, we can know that the specific capacitance decreases with the current density increasing. As far as the three carbon materials, CNTs show better performance than others. At low current density, the specific capacitance of CNTs is adjacent to that of ACF, while higher than that of AB; At high current density, the specific capacitance of CNTs is higher than that of both ACF and AB. What's more, capacity fading of CNTs is smaller than those of both ACF and AB. At 10 mA/cm2 current density, the specific capacitance of CNTs is 1.33 times of that ACF and 1.58 times of that AB, respectively. From the CVs (Fig. 2), the capacitance of three materials is contributed mainly by double-layer, nonfaradically. The performance difference is ascribed to the structure and electrolyte reservoir: CNTs used have a wide diameter range between 20 and 100nm and hollow tube structure, ACF has a narrow diameter range and many micropores, AB are dots and cannot form good conductive net. All the above reasons lead the different electrochemical properties of three additive agents.

  20. Micro-Horn Arrays for Ultrasonic Impedance Matching

    Science.gov (United States)

    Rao, Shanti; Palmer, Dean

    2009-01-01

    Thin-layered structures containing arrays of micromachined horns, denoted solid micro-horn arrays (SMIHAs), have been conceived as improved means of matching acoustic impedances between ultrasonic transducers and the media with which the transducers are required to exchange acoustic energy. Typically, ultrasonic transducers (e.g., those used in medical imaging) are piezoelectric or similar devices, which produce small displacements at large stresses. However, larger displacements at smaller stresses are required in the target media (e.g., human tissues) with which acoustic energy is to be exchanged. Heretofore, efficiencies in transmission of acoustic energy between ultrasonic transducers and target media have been severely limited because substantial mismatches of acoustic impedances have remained, even when coupling material layers have been interposed between the transducers and the target media. In contrast, SMIHAs can, in principle, be designed to effect more nearly complete acoustic impedance matching, leading to power transmission efficiencies of 90 percent or even greater. The SMIHA concept is based on extension, into the higher-frequency/ lower-wavelength ultrasonic range, of the use of horns to match acoustic impedances in the audible and lower-frequency ultrasonic ranges. In matching acoustic impedance in transmission from a higher-impedance acoustic source (e.g., a piezoelectric transducer) and a lowerimpedance target medium (e.g., air or human tissue), a horn acts as a mechanical amplifier. The shape and size of the horn can be optimized for matching acoustic impedance in a specified frequency range. A typical SMIHA would consist of a base plate, a face plate, and an array of horns that would constitute pillars that connect the two plates (see figure). In use, the base plate would be connected to an ultrasonic transducer and the face plate would be placed in contact with the target medium. As at lower frequencies, the sizes and shapes of the pillars

  1. Capacitive Feedthroughs for Medical Implants

    Science.gov (United States)

    Grob, Sven; Tass, Peter A.; Hauptmann, Christian

    2016-01-01

    Important technological advances in the last decades paved the road to a great success story for electrically stimulating medical implants, including cochlear implants or implants for deep brain stimulation. However, there are still many challenges in reducing side effects and improving functionality and comfort for the patient. Two of the main challenges are the wish for smaller implants on one hand, and the demand for more stimulation channels on the other hand. But these two aims lead to a conflict of interests. This paper presents a novel design for an electrical feedthrough, the so called capacitive feedthrough, which allows both reducing the size, and increasing the number of included channels. Capacitive feedthroughs combine the functionality of a coupling capacitor and an electrical feedthrough within one and the same structure. The paper also discusses the progress and the challenges of the first produced demonstrators. The concept bears a high potential in improving current feedthrough technology, and could be applied on all kinds of electrical medical implants, even if its implementation might be challenging.

  2. Ultrahigh Temperature Capacitive Pressure Sensor

    Science.gov (United States)

    Harsh, Kevin

    2014-01-01

    Robust, miniaturized sensing systems are needed to improve performance, increase efficiency, and track system health status and failure modes of advanced propulsion systems. Because microsensors must operate in extremely harsh environments, there are many technical challenges involved in developing reliable systems. In addition to high temperatures and pressures, sensing systems are exposed to oxidation, corrosion, thermal shock, fatigue, fouling, and abrasive wear. In these harsh conditions, sensors must be able to withstand high flow rates, vibration, jet fuel, and exhaust. In order for existing and future aeropropulsion turbine engines to improve safety and reduce cost and emissions while controlling engine instabilities, more accurate and complete sensor information is necessary. High-temperature (300 to 1,350 C) capacitive pressure sensors are of particular interest due to their high measurement bandwidth and inherent suitability for wireless readout schemes. The objective of this project is to develop a capacitive pressure sensor based on silicon carbon nitride (SiCN), a new class of high-temperature ceramic materials, which possesses excellent mechanical and electric properties at temperatures up to 1,600 C.

  3. Comparing flat top and Gaussian focal beam shapes when micromachining steel

    Science.gov (United States)

    Lizotte, Todd E.; Ohar, Orest

    2011-10-01

    Laser micromachining, drilling and marking is extensively used within the aerospace, automotive and firearms industries. The unique properties of lasers make them ideal tools for micromachining a wide diversity of materials, including steel alloys [1]. We describe the results of micromachining of low carbon steel and stainless steel alloys, using a high powered diode pumped solid state (DPSS) laser operating at a wavelength of 355nm. The laser was configured with beam conditioning optics to produce either a flat top beam or a Gaussian output which was then sent through a galvanometer scanner and telecentric lens beam delivery system. This paper outlines the interrelationship of process variables when micromachining fine features in steel and stainless steel alloys. Process variables measured included the optimum laser focus plane, energy density, galvanometer scan rate, and pulse overlap and focal spot diameter. Optimum process performance was evaluated based on a dimensional comparison of the micromachined features from each test coupon, including uniformity and surface roughness of the micromachined surface and the minimization of surface irregularities (stalagmite type slag / debris / corn row patterns) and taper angle of the micromachined feature side walls.

  4. Demonstration of robust micromachined jet technology and its application to realistic flow control problems

    International Nuclear Information System (INIS)

    This paper describes the demonstration of successful fabrication and initial characterization of micromachined pressure sensors and micromachined jets (microjets) fabricated for use in macro flow control and other applications. In this work, the microfabrication technology was investigated to create a micromachined fluidic control system with a goal of application in practical fluids problems, such as UAV (Unmanned Aerial Vehicle)-scale aerodynamic control. Approaches of this work include : (1) the development of suitable micromachined synthetic jets (microjets) as actuators, which obviate the need to physically extend micromachined structures into an external flow ; and (2) a non-silicon alternative micromachining fabrication technology based on metallic substrates and lamination (in addition to traditional MEMS technologies) which will allow the realization of larger scale, more robust structures and larger array active areas for fluidic systems. As an initial study, an array of MEMS pressure sensors and an array of MEMS modulators for orifice-based control of microjets have been fabricated, and characterized. Both pressure sensors and modulators have been built using stainless steel as a substrate and a combination of lamination and traditional micromachining processes as fabrication technologies

  5. Ultrasonic communication in frogs.

    Science.gov (United States)

    Feng, Albert S; Narins, Peter M; Xu, Chun-He; Lin, Wen-Yu; Yu, Zu-Lin; Qiu, Qiang; Xu, Zhi-Min; Shen, Jun-Xian

    2006-03-16

    Among vertebrates, only microchiropteran bats, cetaceans and some rodents are known to produce and detect ultrasounds (frequencies greater than 20 kHz) for the purpose of communication and/or echolocation, suggesting that this capacity might be restricted to mammals. Amphibians, reptiles and most birds generally have limited hearing capacity, with the ability to detect and produce sounds below approximately 12 kHz. Here we report evidence of ultrasonic communication in an amphibian, the concave-eared torrent frog (Amolops tormotus) from Huangshan Hot Springs, China. Males of A. tormotus produce diverse bird-like melodic calls with pronounced frequency modulations that often contain spectral energy in the ultrasonic range. To determine whether A. tormotus communicates using ultrasound to avoid masking by the wideband background noise of local fast-flowing streams, or whether the ultrasound is simply a by-product of the sound-production mechanism, we conducted acoustic playback experiments in the frogs' natural habitat. We found that the audible as well as the ultrasonic components of an A. tormotus call can evoke male vocal responses. Electrophysiological recordings from the auditory midbrain confirmed the ultrasonic hearing capacity of these frogs and that of a sympatric species facing similar environmental constraints. This extraordinary upward extension into the ultrasonic range of both the harmonic content of the advertisement calls and the frog's hearing sensitivity is likely to have co-evolved in response to the intense, predominantly low-frequency ambient noise from local streams. Because amphibians are a distinct evolutionary lineage from microchiropterans and cetaceans (which have evolved ultrasonic hearing to minimize congestion in the frequency bands used for sound communication and to increase hunting efficacy in darkness), ultrasonic perception in these animals represents a new example of independent evolution. PMID:16541072

  6. The ultrasonic modification of thermodynamic and kinetic regularity of lithium intercalation in talc$

    Institute of Scientific and Technical Information of China (English)

    O.V. Balaban; I.I. Grygorchak; R.М. Peleshchak; О.V. Kuzyk; О.О. Dan’kiv

    2014-01-01

    Influence of the ultrasound on talc (Mg3Si4O10(OH)2) cathode material was experimentally investigated. The Gibbs' energy change of the Li+-intercalation process, the diffusion coefficient in LixMg3Si4O10(OH)2, the charge transfer resistance and the capacitance of the electric double layer were studied in electrochemical cells, based on initial and ultrasonic treated talc. The obtained results were interpreted within the nonlinear diffusion-deformation model, which involved formation of vacancy nanoclusters under ultrasonic influence at temperatures lower than a critical value.

  7. Ultrasonic Inspection Of Thick Sections

    Science.gov (United States)

    Friant, C. L.; Djordjevic, B. B.; O'Keefe, C. V.; Ferrell, W.; Klutz, T.

    1993-01-01

    Ultrasonics used to inspect large, relatively thick vessels for hidden defects. Report based on experiments in through-the-thickness transmission of ultrasonic waves in both steel and filament-wound composite cases of solid-fuel rocket motors.

  8. Energy-Efficient Capacitive-Sensor Interfaces

    NARCIS (Netherlands)

    Tan, Z.

    2013-01-01

    This thesis describes the theory, design and realization of energy-efficient capacitive-sensor interfaces that are dedicated to energy-constrained applications. The goal of this work is to explore energy-efficient capacitive-sensor interface design techniques both at the system and the circuit level

  9. Dissecting graphene capacitance in electrochemical cell

    International Nuclear Information System (INIS)

    Quantum capacitance of graphene plays a significant role for graphene's applications in electrochemical devices and sensors, while the determination of these basic characters of Dirac point, Fermi energy, quantum capacitance, etc is still a subject of considerable debate in both experiments and simulations. Here, we report joint first-principles/continuum calculations (JFPCCs) on a monolayer graphene electrode immersed in an electrolyte coupled with a reference electrode under an applied potential. The JFPCCs gave the Fermi level, charge density on graphene, Dirac point energy, electrostatic potential, electric double layer etc as a function of the applied potential with respect to the reference electrode. These results revealed the strongly coupled relationship between Fermi level change and Dirac point shift in electrochemical cell. The total capacitance of the electrochemical cell was dissected into the quantum capacitance of the graphene electrode and the capacitance of the electric double layer. Furthermore, simple and analytic formulas were proposed for the three capacitances, which predicted, in sufficient accuracy, the behavior of capacitance versus potential. These findings deepen the understanding of quantum capacitance of graphene, which will stimulate novel experimental and theoretical studies and boost the applications of graphene in electrochemical and energy areas

  10. Quantum capacitance of the monolayer graphene

    OpenAIRE

    Cheremisin, M. V.

    2012-01-01

    The quantum capacitance of the monolayer graphene for arbitrary carrier density, magnetic field and temperature is found. The density dependence of the quantum capacitance is analyzed for magnetic field(temperature) is fixed(varied) and vice versa. The theory is compared with the experimental data.

  11. Capacitance densitometer for flow regime identification

    Science.gov (United States)

    Shipp, Jr., Roy L.

    1978-01-01

    This invention relates to a capacitance densitometer for determining the flow regime of a two-phase flow system. A two-element capacitance densitometer is used in conjunction with a conventional single-beam gamma densitometer to unambiguously identify the prevailing flow regime and the average density of a flowing fluid.

  12. Capacitance-coupled wiper increases potentiometer life

    Science.gov (United States)

    Dimeff, J.

    1968-01-01

    Capacitively-coupled wiper reduces the friction between the sliding contact and the potentiometer element in conventional potentiometers. A small preamplifier employed close to the wiper reduces errors caused by output cable capacitance. The device is friction free with resultant low wear and has high speed and high resolution.

  13. Ultrasonics in Dentistry

    Science.gov (United States)

    Walmsley, A. D.

    Ultrasonic instruments have been used in dentistry since the 1950's. Initially they were used to cut teeth but very quickly they became established as an ultrasonic scaler which was used to remove deposits from the hard tissues of the tooth. This enabled the soft tissues around the tooth to return to health. The ultrasonic vibrations are generated in a thin metal probe and it is the working tip that is the active component of the instrument. Scanning laser vibrometry has shown that there is much variability in their movement which is related to the shape and cross sectional shape of the probe. The working instrument will also generate cavitation and microstreaming in the associated cooling water. This can be mapped out along the length of the instrument indicating which are the active areas. Ultrasonics has also found use for cleaning often inaccessible or different surfaces including root canal treatment and dental titanium implants. The use of ultrasonics to cut bone during different surgical techniques shows considerable promise. More research is indicated to determine how to maximize the efficiency of such instruments so that they are more clinically effective.

  14. Conductivity Effect on the Capacitance Measurement of a Parallel-Plate Capacitive Sensor System

    Directory of Open Access Journals (Sweden)

    Peyman Azimi

    2011-01-01

    Full Text Available In this article design and operation of a parallel-plate capacitive sensor based on the dielectric capacitance and conductance change of the gap medium is reported. The designed system was used to determine characteristics of different water liquids as a result of the capacitance variations. The air gap capacitance is measured and then by filling the gap with a liquid the capacitance is monitored for different liquids. Proposed sensor is used for the distilled, tap, boiled, and salt water measurements and the capacitance results are compared. A big difference about 45.5 :F in capacitance values for the salt and distilled water shows a high sensitivity, which can be used to recognize different water liquids. The experimental results are promising for water liquids and verify the successful operation of such a device as a liquid sensor, a useful method for checking the electrical quality of the water that is required for different applications.

  15. Pick-and-place process for sensitivity improvement of the capacitive type CMOS MEMS 2-axis tilt sensor

    International Nuclear Information System (INIS)

    This study exploits the foundry available complimentary metal-oxide-semiconductor (CMOS) process and the packaging house available pick-and-place technology to implement a capacitive type micromachined 2-axis tilt sensor. The suspended micro mechanical structures such as the spring, stage and sensing electrodes are fabricated using the CMOS microelectromechanical systems (MEMS) processes. A bulk block is assembled onto the suspended stage by pick-and-place technology to increase the proof-mass of the tilt sensor. The low temperature UV-glue dispensing and curing processes are employed to bond the block onto the stage. Thus, the sensitivity of the CMOS MEMS capacitive type 2-axis tilt sensor is significantly improved. In application, this study successfully demonstrates the bonding of a bulk solder ball of 100 µm in diameter with a 2-axis tilt sensor fabricated using the standard TSMC 0.35 µm 2P4M CMOS process. Measurements show the sensitivities of the 2-axis tilt sensor are increased for 2.06-fold (x-axis) and 1.78-fold (y-axis) after adding the solder ball. Note that the sensitivity can be further improved by reducing the parasitic capacitance and the mismatch of sensing electrodes caused by the solder ball. (paper)

  16. Pick-and-place process for sensitivity improvement of the capacitive type CMOS MEMS 2-axis tilt sensor

    Science.gov (United States)

    Chang, Chun-I.; Tsai, Ming-Han; Liu, Yu-Chia; Sun, Chih-Ming; Fang, Weileun

    2013-09-01

    This study exploits the foundry available complimentary metal-oxide-semiconductor (CMOS) process and the packaging house available pick-and-place technology to implement a capacitive type micromachined 2-axis tilt sensor. The suspended micro mechanical structures such as the spring, stage and sensing electrodes are fabricated using the CMOS microelectromechanical systems (MEMS) processes. A bulk block is assembled onto the suspended stage by pick-and-place technology to increase the proof-mass of the tilt sensor. The low temperature UV-glue dispensing and curing processes are employed to bond the block onto the stage. Thus, the sensitivity of the CMOS MEMS capacitive type 2-axis tilt sensor is significantly improved. In application, this study successfully demonstrates the bonding of a bulk solder ball of 100 µm in diameter with a 2-axis tilt sensor fabricated using the standard TSMC 0.35 µm 2P4M CMOS process. Measurements show the sensitivities of the 2-axis tilt sensor are increased for 2.06-fold (x-axis) and 1.78-fold (y-axis) after adding the solder ball. Note that the sensitivity can be further improved by reducing the parasitic capacitance and the mismatch of sensing electrodes caused by the solder ball.

  17. Artificial Intelligence Assists Ultrasonic Inspection

    Science.gov (United States)

    Schaefer, Lloyd A.; Willenberg, James D.

    1992-01-01

    Subtle indications of flaws extracted from ultrasonic waveforms. Ultrasonic-inspection system uses artificial intelligence to help in identification of hidden flaws in electron-beam-welded castings. System involves application of flaw-classification logic to analysis of ultrasonic waveforms.

  18. Ultrasonic Processing of Materials

    Science.gov (United States)

    Han, Qingyou

    2015-08-01

    Irradiation of high-energy ultrasonic vibration in metals and alloys generates oscillating strain and stress fields in solids, and introduces nonlinear effects such as cavitation, acoustic streaming, and radiation pressure in molten materials. These nonlinear effects can be utilized to assist conventional material processing processes. This article describes recent research at Oak Ridge National Labs and Purdue University on using high-intensity ultrasonic vibrations for degassing molten aluminum, processing particulate-reinforced metal matrix composites, refining metals and alloys during solidification process and welding, and producing bulk nanostructures in solid metals and alloys. Research results suggest that high-intensity ultrasonic vibration is capable of degassing and dispersing small particles in molten alloys, reducing grain size during alloy solidification, and inducing nanostructures in solid metals.

  19. Ultrasonic tests. Pt. 2

    International Nuclear Information System (INIS)

    After a basic treatment of ultrasonic wave propagation, of the state-of-the-art methods and the technical background in the preceeding part, advanced ultrasonic NDT techniques are presented here. The discussion of new development includes - manipulation systems, - automation of ultrasonic testing methods, documentation and evaluation. In the middle of this part the main problem areas will be discussed: - detection of defects (e.g. in coarse grained structures and welds), - classification of defects (e.g. discrimination between crack-like and volumetric faults), - sizing of defects. Research in the field of acoustical holography, development of probes and phased arrays, electromagnetic acoustic transducers and signal enhancement are the main contributing parts to the report. (orig./RW)

  20. Fabrication and characterization of annular-array, high-frequency, ultrasonic transducers based on PZT thick film

    OpenAIRE

    Wang, D; Filoux, E; Levassort, F; Lethiecq, M.; Rocks, SA; Dorey, RA

    2014-01-01

    In this work, low temperature deposition of ceramics, in combination with micromachining techniques have been used to fabricate a kerfed, annular-array, high-frequency, micro ultrasonic transducer (with seven elements). This transducer was based on PZT thick film and operated in thickness mode. The 27 μm thick PZT film was fabricated using a low temperature (720 °C) composite sol-gel ceramic (sol + ceramic powder) deposition technique. Chemical wet etching was used to pattern the PZT thick fi...

  1. Ultrasonic magnetic abrasive finishing

    Institute of Scientific and Technical Information of China (English)

    LU Ya-ping; MA Ji; ZHANG Jun-qiang; WANG Long-shan

    2006-01-01

    Put forward a new kind of polishing method, ultrasonic magnetic abrasive finishing (UMAF), and studied its mechanism of improving polishing efficiency. By analyzing all kind of forces acting on single abrasive particle in the polishing process and calculating the size of the composition of forces, get the conclusion that UMAF will enhance the efficiency of the normal magnetic abrasive finishing(MAF) due to the ultrasonic vibration increases the cutting force and depth. At last the idea of designing the UMAF system based on numerical control milling machine is put forward which is convenient to setup and will accelerate the practical application of MAF.

  2. A Micromachined Piezoresistive Pressure Sensor with a Shield Layer

    Directory of Open Access Journals (Sweden)

    Gang Cao

    2016-08-01

    Full Text Available This paper presents a piezoresistive pressure sensor with a shield layer for improved stability. Compared with the conventional piezoresistive pressure sensors, the new one reported in this paper has an n-type shield layer that covers p-type piezoresistors. This shield layer aims to minimize the impact of electrical field and reduce the temperature sensitivity of piezoresistors. The proposed sensors have been successfully fabricated by bulk-micromachining techniques. A sensitivity of 0.022 mV/V/kPa and a maximum non-linearity of 0.085% FS are obtained in a pressure range of 1 MPa. After numerical simulation, the role of the shield layer has been experimentally investigated. It is demonstrated that the shield layer is able to reduce the drift caused by electrical field and ambient temperature variation.

  3. A Micromachined Piezoresistive Pressure Sensor with a Shield Layer

    Science.gov (United States)

    Cao, Gang; Wang, Xiaoping; Xu, Yong; Liu, Sheng

    2016-01-01

    This paper presents a piezoresistive pressure sensor with a shield layer for improved stability. Compared with the conventional piezoresistive pressure sensors, the new one reported in this paper has an n-type shield layer that covers p-type piezoresistors. This shield layer aims to minimize the impact of electrical field and reduce the temperature sensitivity of piezoresistors. The proposed sensors have been successfully fabricated by bulk-micromachining techniques. A sensitivity of 0.022 mV/V/kPa and a maximum non-linearity of 0.085% FS are obtained in a pressure range of 1 MPa. After numerical simulation, the role of the shield layer has been experimentally investigated. It is demonstrated that the shield layer is able to reduce the drift caused by electrical field and ambient temperature variation. PMID:27529254

  4. Heavy ion beam micromachining on LiNbO3

    International Nuclear Information System (INIS)

    In this work 3D micromachining of x-cut lithium niobate crystals was performed using the high energy heavy ion microbeam (HIM) at the Tandar Laboratory, Buenos Aires. The samples were machined using 35Cl beams at 70 MeV bombarding energy combined with wet etching with hydrofluoric acid solutions at room temperature. As the ion beam penetrates the sample, it induces lattice damage increasing dramatically the local etching rate of the material. This technique was applied to the fabrication of 3D waveguides with long control electrodes. The resulting structures indicate that well defined contours with nearly vertical sidewalls can be made. The results also show that with fluences of only 5 x 1012 ions/cm2, this technique is suitable for the fabrication of different shapes of LiNbO3 control-waveguides that can be used in different optical devices and matched with the existing optical fibers.

  5. A Micromachined Piezoresistive Pressure Sensor with a Shield Layer.

    Science.gov (United States)

    Cao, Gang; Wang, Xiaoping; Xu, Yong; Liu, Sheng

    2016-08-13

    This paper presents a piezoresistive pressure sensor with a shield layer for improved stability. Compared with the conventional piezoresistive pressure sensors, the new one reported in this paper has an n-type shield layer that covers p-type piezoresistors. This shield layer aims to minimize the impact of electrical field and reduce the temperature sensitivity of piezoresistors. The proposed sensors have been successfully fabricated by bulk-micromachining techniques. A sensitivity of 0.022 mV/V/kPa and a maximum non-linearity of 0.085% FS are obtained in a pressure range of 1 MPa. After numerical simulation, the role of the shield layer has been experimentally investigated. It is demonstrated that the shield layer is able to reduce the drift caused by electrical field and ambient temperature variation.

  6. Solid polymer electrolyte composite membrane comprising laser micromachined porous support

    Science.gov (United States)

    Liu, Han; LaConti, Anthony B.; Mittelsteadt, Cortney K.; McCallum, Thomas J.

    2011-01-11

    A solid polymer electrolyte composite membrane and method of manufacturing the same. According to one embodiment, the composite membrane comprises a rigid, non-electrically-conducting support, the support preferably being a sheet of polyimide having a thickness of about 7.5 to 15 microns. The support has a plurality of cylindrical pores extending perpendicularly between opposing top and bottom surfaces of the support. The pores, which preferably have a diameter of about 5 microns, are made by laser micromachining and preferably are arranged in a defined pattern, for example, with fewer pores located in areas of high membrane stress and more pores located in areas of low membrane stress. The pores are filled with a first solid polymer electrolyte, such as a perfluorosulfonic acid (PFSA) polymer. A second solid polymer electrolyte, which may be the same as or different than the first solid polymer electrolyte, may be deposited over the top and/or bottom of the first solid polymer electrolyte.

  7. Experimental Investigation on Complex Structures Machining by Electrochemical Micromachining Technology

    Institute of Scientific and Technical Information of China (English)

    Liu Yong; Zhu Di; Zeng Yongbin; Huang Shaofu; Yu Hongbing

    2010-01-01

    Electrochemical micromachining(EMM)technology for fabricating micro structures is presented in this article.By applying ultra short pulses,dissolution of a workpiece can be restricted to the region very close to the electrode.First,an EMM system for meeting the requirements of the EMM process is established.Second,sets of experiments is carried out to investigate the influence of some of the predominant electrochemical process parameters such as electrical parameters,feed rate,electrode geometry features and electrolyte composition on machining quality,especially the influences of pulse on time on shape precision and working end shape of electrode on machined surface quality.Finally,after the preliminary experiments,a complex microstructure with good shape precision and surface quality is successfully obtained.

  8. Femtosecond laser embedded grating micromachining of flexible PDMS plates

    Science.gov (United States)

    Cho, Sung-Hak; Chang, Won-Seok; Kim, Kwang-Ryul; Hong, Jong Wook

    2009-04-01

    We report on the femtosecond laser micromachining of photo-induced embedded diffraction grating in flexible Poly (Dimethly Siloxane) (PDMS) plates using a high-intensity femtosecond (130 fs) Ti: sapphire laser ( λp = 800 nm). The refractive index modifications with diameters ranging from 2 μm to 5 μm were photo-induced after the irradiation with peak intensities of more than 1 × 10 11 W/cm 2. The graded refractive index profile was fabricated to be a symmetric around from the center of the point at which femtosecond laser was focused. The maximum refractive index change (Δ n) was estimated to be 2 × 10 -3. By the X- Y- Z scanning of sample, the embedded diffraction grating in PDMS plate was fabricated successfully using a femtosecond laser.

  9. Characterization of a new class of surface micromachined pumps.

    Energy Technology Data Exchange (ETDEWEB)

    Galambos, Paul C.

    2004-12-01

    This is the latest in a series of LDRD's that we have been conducting with Florida State University/Florida A&M University (FSU/FAMU) under the campus executive program. This research builds on the earlier projects; ''Development of Highly Integrated Magnetically and Electrostatically Actuated Micropumps'' (SAND2003-4674) and ''Development of Magnetically and Electrostatically Driven Surface Micromachined Pumps'' (SAND2002-0704P). In this year's LDRD we designed 2nd generation of surface micromachined (SMM) gear and viscous pumps. Two SUMMiT{trademark} modules full of design variations of these pumps were fabricated and one SwIFT{trademark} module is still in fabrication. The SwIFT{trademark} fabrication process results in a transparent pump housing cover that will enable visualization inside the pumps. Since the SwIFT{trademark} pumps have not been tested as they are still in fabrication, this report will focus on the 2nd generation SUMMiT{trademark} designs. Pump testing (pressure vs. flow) was conducted on several of the SUMMiT{trademark} designs resulting in the first pump curve for this class of SMM pumps. A pump curve was generated for the higher torque 2nd generation gear pump designed by Jason Hendrix of FSU. The pump maximum flow rate at zero head was 6.5 nl/s for a 30V, 30 Hz square wave signal. This level of flow rate would be more than adequate for our typical SMM SUMMiT{trademark} or SwIFT{trademark} channels which have typical volumes on the order of 50 pl.

  10. Aligned carbon nanotube based ultrasonic microtransducers for durability monitoring in civil engineering

    OpenAIRE

    LEBENTAL, Bérengère; Chainais, Pierre; CHENEVIER, Pascale; Chevalier, Nicolas; Delevoye, Eric; Fabbri, Jean-Marc; Nicoletti, Sergio; Renaux, Philippe; Ghis, Anne

    2011-01-01

    International audience Structural health monitoring of porous materials such as concrete is becoming a major component in our resource-limited economy, as it conditions durable exploitation of existing facilities. Durability in porous materials depends on nanoscale features which need to be monitored in situ with nanometric resolution. To address this problem, we put forward an approach based on the development of a new nanosensor, namely a capacitive micrometric ultrasonic transducer whos...

  11. Ultrasonic Drilling and Coring

    Science.gov (United States)

    Bar-Cohen, Yoseph

    1998-01-01

    A novel drilling and coring device, driven by a combination, of sonic and ultrasonic vibration, was developed. The device is applicable to soft and hard objects using low axial load and potentially operational under extreme conditions. The device has numerous potential planetary applications. Significant potential for commercialization in construction, demining, drilling and medical technologies.

  12. Complementary surface charge for enhanced capacitive deionization

    NARCIS (Netherlands)

    Gao, X.; Porada, S.; Omosebi, A.; Liu, K.L.; Biesheuvel, P.M.; Landon, J.

    2016-01-01

    Commercially available activated carbon cloth electrodes are treated using nitric acid and ethylenediamine solutions, resulting in chemical surface charge enhanced carbon electrodes for capacitive deionization (CDI) applications. Surface charge enhanced electrodes are then configured in a CDI cel

  13. Studying the mechanism of micromachining by short pulsed laser

    Science.gov (United States)

    Gadag, Shiva

    The semiconductor materials like Si and the transparent dielectric materials like glass and quartz are extensively used in optoelectronics, microelectronics, and microelectromechanical systems (MEMS) industries. The combination of these materials often go hand in hand for applications in MEMS such as in chips for pressure sensors, charge coupled devices (CCD), and photovoltaic (PV) cells for solar energy generation. The transparent negative terminal of the solar cell is made of glass on one surface of the PV cell. The positive terminal (cathode) on the other surface of the solar cell is made of silicon with a glass negative terminal (anode). The digital watches and cell phones, LEDs, micro-lens, optical components, and laser optics are other examples for the application of silicon and or glass. The Si and quartz are materials extensively used in CCD and LED for digital cameras and CD players respectively. Hence, three materials: (1) a semiconductor silicon and transparent dielectrics,- (2) glass, and (3) quartz are chosen for laser micromachining as they have wide spread applications in microelectronics industry. The Q-switched, nanosecond pulsed lasers are most extensively used for micro-machining. The nanosecond type of short pulsed laser is less expensive for the end users than the second type, pico or femto, ultra-short pulsed lasers. The majority of the research work done on these materials (Si, SiO 2, and glass) is based on the ultra-short pulsed lasers. This is because of the cut quality, pin point precision of the drilled holes, formation of the nanometer size microstructures and fine features, and minimally invasive heat affected zone. However, there are many applications such as large surface area dicing, cutting, surface cleaning of Si wafers by ablation, and drilling of relatively large-sized holes where some associated heat affected zone due to melting can be tolerated. In such applications the nanosecond pulsed laser ablation of materials is very

  14. Automatic Power Factor Correction Using Capacitive Bank

    OpenAIRE

    Mr.Anant Kumar Tiwari,; Mrs. Durga Sharma

    2014-01-01

    The power factor correction of electrical loads is a problem common to all industrial companies. Earlier the power factor correction was done by adjusting the capacitive bank manually [1]. The automated power factor corrector (APFC) using capacitive load bank is helpful in providing the power factor correction. Proposed automated project involves measuring the power factor value from the load using microcontroller. The design of this auto-adjustable power factor correction is ...

  15. Capacitance of Graphene Bilayer as a Which-Layer Probe

    OpenAIRE

    Young, Andrea F.; Levitov, Leonid S.

    2011-01-01

    The unique capabilities of capacitance measurements in bilayer graphene enable probing of layer-specific properties that are normally out of reach in transport measurements. Furthermore, capacitance measurements in the top-gate and penetration field geometries are sensitive to different physical quantities: the penetration field capacitance probes the two layers equally, whereas the top gate capacitance preferentially samples the near layer, resulting in the "near-layer capacitance enhancemen...

  16. Nanoscale capacitance: A classical charge-dipole approximation

    OpenAIRE

    Jun-Qiang Lu; Jonathan Gonzalez; Carlos Sierra; Yang Li

    2013-01-01

    Modeling nanoscale capacitance presents particular challenge because of dynamic contribution from electrodes, which can usually be neglected in modeling macroscopic capacitance and nanoscale conductance. We present a model to calculate capacitances of nano-gap configurations and define effective capacitances of nanoscale structures. The model is implemented by using a classical atomic charge-dipole approximation and applied to calculate capacitance of a carbon nanotube nano-gap and effective ...

  17. Cheese maturity assessment using ultrasonics.

    Science.gov (United States)

    Benedito, J; Carcel, J; Clemente, G; Mulet, A

    2000-02-01

    The relationship between Mahon cheese maturity and ultrasonic velocity was examined. Moisture and textural properties were used as maturity indicators. The ultrasonic velocity of the cheese varied between 1630 and 1740 m/s, increasing with the curing time mainly because of loss of water, which also produced an increase of the textural properties. Because of the nature of low-intensity ultrasonics, velocity was better related to those textural parameters that involved small displacements. Ultrasonic velocity decreased with increasing temperature because of the negative temperature coefficient of the ultrasonic velocity of fat and the melting of fat. These results highlight the potential use of ultrasonic velocity measurements to rapidly and nondestructively assess cheese maturity. PMID:10714857

  18. Ultrasonic thermometer isolation standoffs

    International Nuclear Information System (INIS)

    A method is provided for minimizing sticking of the transmission line to the protective sheath and preventing noise echoes from interfering with signal echoes in an improved high temperature ultrasonic thermometer which includes an ultrasonic transmission line surrounded by a protective sheath. Small isolation standoffs are mounted on the transmission line to minimize points of contact between the transmission line and the protective sheath, the isolation standoffs serving as discontinuities mounted on the transmission line at locations where a signal echo is desired or where an echo can be tolerated. Consequently any noise echo generated by the sticking of the standoff to the protective sheath only adds to the amplitude of the echo generated at the standoff and does not interfere with the other signal echoes. 6 claims, 3 figures

  19. Ultrasonic tests. Pt. 1

    International Nuclear Information System (INIS)

    Nondestructive testing (NDT) plays an important part in the field of nuclear power plants operation. The report is concentrated to the primary loop components' ultrasonic NDT. It includes inspection techniques used during fabrication and in service. While a second part is dealing with advanced NDT methods, this first presentation introduces into the variety of ultrasonic testing procedures. After a treatment of the physical background the appropriate choice of equipment and techniques in respect of material, geometry and accessibility will be discussed. The state-of-the-art for detection, location, normalization, classification and sizing of defects will be presented. Finally, evaluation of faults and accept/reject criteria (e.g. based on fracture mechanics) together with the qualification of NDE personnel are concluding the contribution. (orig./RW)

  20. Ultrasonic nondestructive tubing inspection system

    International Nuclear Information System (INIS)

    A system for measuring the extent of tube wall erosion in an inspection region of a heat exchanger tube of a nuclear steam generator, uses an ultrasonic means driven helically inside the eroded tube which may be filled with a fluid (e.g., water) to minimize ultrasonic wave attenuation. A control means cooperates with the ultrasonic means to produce a map of the tube wall thickness in an inspection region

  1. [Development of ultrasonic power meter].

    Science.gov (United States)

    Huang, Hongxin; Hu, Changming; Zheng, Yan; Xu, Honglei; Zhou, Wohua; Wu, Ziwen; Yu, Liudan; Hao, Jiandong; Luo, Yifan

    2014-07-01

    This article describes the design and development of an ultrasonic power meter which is consist of an electronic balance, a practice target, an acoustic enclosures and a blocking. The electronic balance mounted on the blocking is linked with the practice target by connecting rod. By adjusting the blocking makes the practice target suspended above ultrasound probe, and then the ultrasonic power can be measured. After initial tests, the ultrasonic power meter performanced with good stability and high precision. PMID:25330604

  2. Pulsed ultrasonic stir welding system

    Science.gov (United States)

    Ding, R. Jeffrey (Inventor)

    2013-01-01

    An ultrasonic stir welding system includes a welding head assembly having a plate and a rod passing through the plate. The rod is rotatable about a longitudinal axis thereof. During a welding operation, ultrasonic pulses are applied to the rod as it rotates about its longitudinal axis. The ultrasonic pulses are applied in such a way that they propagate parallel to the longitudinal axis of the rod.

  3. Intravascular Ultrasonic Imaging

    OpenAIRE

    Tobis, JM; Mahon, D.; Moriuchi, M; Mallery, JA; Lehmann, K; Griffith, J.; Gessert, J; Zalesky, P; McRae, M; Dwyer, ML; Henry, WL

    1990-01-01

    Because conventional imaging methods are inadequate for evaluating human coronary arteries in vivo, an intravascular ultrasonic imaging catheter was developed that allows the arterial wall to be studied in cross-section from within the artery. The catheter incorporates a mechanically rotating 20-MHz transducer, which is designed so that the ringdown occurs within the catheter and imaging is permitted up to the catheter's surface. The device rotates at 1800-rpm within a plastic sleeve and prov...

  4. Ultrasonic techniques for process monitoring and control.

    Energy Technology Data Exchange (ETDEWEB)

    Chien, H.-T.

    1999-03-24

    Ultrasonic techniques have been applied successfully to process monitoring and control for many industries, such as energy, medical, textile, oil, and material. It helps those industries in quality control, energy efficiency improving, waste reducing, and cost saving. This paper presents four ultrasonic systems, ultrasonic viscometer, on-loom, real-time ultrasonic imaging system, ultrasonic leak detection system, and ultrasonic solid concentration monitoring system, developed at Argonne National Laboratory in the past five years for various applications.

  5. Ultrasonic investigations in intermetallics

    Indian Academy of Sciences (India)

    Devraj Singh; D K Pandey

    2009-02-01

    Ultrasonic attenuation for the longitudinal and shear waves due to phonon–phonon interaction and thermoelastic mechanism have been evaluated in B2 structured in-termetallic compounds AgMg, CuZr, AuMg, AuTi, AuMn, AuZn and AuCd along $\\langle 1 0 0 \\rangle, \\langle 1 1 1 \\rangle and \\langle 1 1 0 \\rangle crystallographic directions at room temperature. For the same evaluations, second- and third-order elastic constants, ultrasonic velocities, Grüneisen parameters, non-linearity parameter, Debye temperature and thermal relaxation time are also computed. Although the molecular weight of these materials increases from AgMg to AuCd, the obtained results are affected with the deviation number. Attenuation of ultrasonic waves due to phonon–phonon interaction is predominant over thermoelastic loss. Results are compared with available theoretical and experimental results. The results with other well-known physical properties are useful for industrial purposes.

  6. Ultrasonic Cutting of Foods

    Science.gov (United States)

    Schneider, Yvonne; Zahn, Susann; Rohm, Harald

    In the field of food engineering, cutting is usually classified as a mechanical unit operation dealing with size reduction by applying external forces on a bulk product. Ultrasonic cutting is realized by superpositioning the macroscopic feed motion of the cutting device or of the product with a microscopic vibration of the cutting tool. The excited tool interacts with the product and generates a number of effects. Primary energy concentration in the separation zone and the modification of contact friction along the tool flanks arise from the cyclic loading and are responsible for benefits such as reduced cutting force, smooth cut surface, and reduced product deformation. Secondary effects such as absorption and cavitation originate from the propagation of the sound field in the product and are closely related to chemical and physical properties of the material to be cut. This chapter analyzes interactions between food products and ultrasonic cutting tools and relates these interactions with physical and chemical product properties as well as with processing parameters like cutting velocity, ultrasonic amplitude and frequency, and tool design.

  7. Micromachined silicon cantilever beam accelerometer incorporating an integrated optical waveguide

    Science.gov (United States)

    Burcham, Kevin E.; De Brabander, Gregory N.; Boyd, Joseph T.

    1993-01-01

    A micromachined cantilever beam accelerometer is described in which beam deflection is determined optically. A diving board structure is anisotropically etched into a silicon wafer. This diving board structure is patterned from the wafer backside so as to leave a small gap between the tip of the diving board and the opposite fixed edge on the front side of the wafer. In order to sense a realistic range of accelerations, a foot mass incorporated onto the end of the beam is found to provide design flexibility. A silicon nitride optical waveguide is then deposited by low pressure chemical vapor deposition (LPCVD) onto the sample. Beam deflection is measured by the decrease of light coupled across the gap between the waveguide sections. In order to investigate sensor response and simulate deflection of the beam, we utilized a separate beam and waveguide section which could be displaced from one another in a precisely controlled manner. Measurements were performed on samples with gaps of 4.0, 6.0, and 8.0 micron and the variation of the fraction of light coupled across the gap as a function of displacement and gap spacing was found to agree with overlap integral calculations.

  8. Thermal dependence of electrical characteristics of micromachined silica microchannel plates

    Science.gov (United States)

    Tremsin, Anton S.; Vallerga, John V.; Siegmund, Oswald H. W.; Beetz, Charles P.; Boerstler, Robert W.

    2004-04-01

    Micromachined silica microchannel plates (MCPs) under development have a number of advantages over standard glass MCPs and open completely new possibilities in detector technologies. In this article we present the results of our studies on the thermal properties of silica microchannel plates (sMCPs). Similar to standard glass microchanel plates the resistance of silica MCPs was measured to change exponentially with temperature with a negative thermal coefficient of -0.036 per °C, somewhat larger than that of standard glass MCPs. The resistance also decreases linearly with the applied voltage, with the voltage coefficient of -3.1×10-4 V-1. With the knowledge of these two coefficients, our thermal model allows the calculation of the maximum voltage, which can be applied to a given MCP without inducing a thermal runaway. A typical 25 mm diam, 240 μm thick sMCP with 6 μm pores has to have the resistance larger than ˜30 MΩ to operate safely at voltages up to 800 V. With this model we can also calculate the time required for a given silica MCP to reach the point of thermal equilibrium after a voltage increase. We hope that the ongoing efforts on a proper modification of the sMCP semiconducting layer will lead to the production of new MCPs with a small negative or even a positive thermal coefficient, reducing the possibility of thermal runaways of low-resistance MCPs required for high count rate applications.

  9. Giant flexoelectric polarization in a micromachined ferroelectric diaphragm

    KAUST Repository

    Wang, Zhihong

    2012-08-14

    The coupling between dielectric polarization and strain gradient, known as flexoelectricity, becomes significantly large on the micro- and nanoscale. Here, it is shown that giant flexoelectric polarization can reverse remnant ferroelectric polarization in a bent Pb(Zr0.52Ti0.48) O3 (PZT) diaphragm fabricated by micromachining. The polarization induced by the strain gradient and the switching behaviors of the polarization in response to an external electric field are investigated by observing the electromechanical coupling of the diaphragm. The method allows determination of the absolute zero polarization state in a PZT film, which is impossible using other existing methods. Based on the observation of the absolute zero polarization state and the assumption that bending of the diaphragm is the only source of the self-polarization, the upper bound of flexoelectric coefficient of PZT film is calculated to be as large as 2.0 × 10-4 C m -1. The strain gradient induced by bending the diaphragm is measured to be on the order of 102 m-1, three orders of magnitude larger than that obtained in the bulk material. Because of this large strain gradient, the estimated giant flexoelectric polarization in the bent diaphragm is on the same order of magnitude as the normal remnant ferroelectric polarization of PZT film. Copyright © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

  10. Thermoelectric Device Fabrication Using Thermal Spray and Laser Micromachining

    Science.gov (United States)

    Tewolde, Mahder; Fu, Gaosheng; Hwang, David J.; Zuo, Lei; Sampath, Sanjay; Longtin, Jon P.

    2016-02-01

    Thermoelectric generators (TEGs) are solid-state devices that convert heat directly into electricity. They are used in many engineering applications such as vehicle and industrial waste-heat recovery systems to provide electrical power, improve operating efficiency and reduce costs. State-of-art TEG manufacturing is based on prefabricated materials and a labor-intensive process involving soldering, epoxy bonding, and mechanical clamping for assembly. This reduces their durability and raises costs. Additive manufacturing technologies, such as thermal spray, present opportunities to overcome these challenges. In this work, TEGs have been fabricated for the first time using thermal spray technology and laser micromachining. The TEGs are fabricated directly onto engineering component surfaces. First, current fabrication techniques of TEGs are presented. Next, the steps required to fabricate a thermal spray-based TEG module, including the formation of the metallic interconnect layers and the thermoelectric legs are presented. A technique for bridging the air gap between two adjacent thermoelectric elements for the top layer using a sacrificial filler material is also demonstrated. A flat 50.8 mm × 50.8 mm TEG module is fabricated using this method and its performance is experimentally characterized and found to be in agreement with expected values of open-circuit voltage based on the materials used.

  11. 1 THz Micromachined Waveguide Band-Pass Filter

    Science.gov (United States)

    Liu, Shuang; Hu, Jiang; Zhang, Yong; Zheng, Zhongwan; Liu, Yupeng; Xu, Ruimin; Xue, Quan

    2016-05-01

    This paper presents a waveguide band-pass filter operating at the 0.75 ˜ 1.1 THz frequency band. The metal conductivity, the surface impedance, and the skin depth are investigated in the terahertz (THz) frequency band for more accurate designs, especially at the 1 THz and higher frequencies. Because the influence of the fabrication tolerance on the component performance cannot be negligible while the frequency increases, it is a necessary to adopt the simple structure with less resonant cavities for obtaining the given performance. Therefore, the filter in this paper is designed based on the TE301/TE102 dual-mode rectangular waveguide resonant cavities, which has fewer cavities and better rejection of the stop-band. The proposed filter is fabricated using the deep reactive ion etching (DRIE) micromachining technique. Measured results are in good agreement with simulations, which verifies the accuracy of the analysis above, and the design process is valuable to realize high-performance passive components while the frequency is up to 1 THz or higher frequencies.

  12. Micromachining of Soft Polymer Material applying Cryogenic Cooling

    Science.gov (United States)

    Kakinuma, Yasuhiro; Yasuda, Nobuhito; Aoyama, Tojiro

    Polydimethylsiloxane (PDMS) is one of the important materials for microfluidic chips. The pattern of micro channels on the PDMS plate is usually fabricated through the photolithography and micro molding process. However, the photolithographic method requires multi chemical and mechanical processes and resultant long process time. The micro milling process is a feasible method for rapid fabrication of various patterns of micro channels. However, micromachining has not yet been applied to soft polymer materials. It is difficult to machine elastic materials such as PDMS because of their low toughness. In order to machine a micro grooves on soft polymer materials, the cutting process applying cryogenic cooling is proposed because the elastic properties of soft polymer materials remarkably change from rubbery state to glassy state below the glass transition temperature. In this study, the freezing milling method using liquid nitrogen is applied to the micro grooving of PDMS. The result of a cutting test shows that micro grooves can be shaped easily and machined accurately in PDMS by the proposed method.

  13. Integrated Optical Interferometers with Micromachined Diaphragms for Pressure Sensing

    Science.gov (United States)

    DeBrabander, Gregory N.; Boyd, Joseph T.

    1996-01-01

    Optical pressure sensors have been fabricated which use an integrated optical channel waveguide that is part of an interferometer to measure the pressure-induced strain in a micromachined silicon diaphragm. A silicon substrate is etched from the back of the wafer leaving a rectangular diaphragm. On the opposite side of the wafer, ring resonator and Mach-Zehnder interferometers are formed with optical channel waveguides made from a low pressure chemical vapor deposited film of silicon oxynitride. The interferometer's phase is altered by pressure-induced stress in a channel segment positioned over the long edge of the diaphragm. The phase change in the ring resonator is monitored using a link-insensitive swept frequency laser diode, while in the Mach-Zehnder it is determined using a broad band super luminescent diode with subsequent wavelength separation. The ring resonator was found to be highly temperature sensitive, while the Mach-Zehnder, which had a smaller optical path length difference, was proportionally less so. The quasi-TM mode was more sensitive to pressure, in accord with calculations. Waveguide and sensor theory, sensitivity calculations, a fabrication sequence, and experimental results are presented.

  14. Towards a Casimir Force Measurement between Micromachined Parallel Plate Structures

    Directory of Open Access Journals (Sweden)

    Remco J. Wiegerink

    2012-11-01

    Full Text Available Ever since its prediction, experimental investigation of the Casimir force has been of great scientific interest. Many research groups have successfully attempted quantifying the force with different device geometries; however, measurement of the Casimir force between parallel plates with sub-micron separation distance is still a challenging task, since it becomes extremely difficult to maintain sufficient parallelism between the plates. The Casimir force can significantly influence the operation of micro devices and to realize reliable and reproducible devices it is necessary to understand and experimentally verify the influence of the Casimir force at sub-micron scale. In this paper, we present the design principle, fabrication and characterization of micromachined parallel plate structures that could allow the measurement of the Casimir force with tunable separation distance in the range of 100 to 1000 nm. Initially, a gold coated parallel plate structure is explored to measure the Casimir force, but also other material combinations could be investigated. Using gold-silicon eutectic bonding, a reliable approach to bond chips with integrated suspended plates together with a well-defined separation distance in the order of 1–2 μm is developed.

  15. Carbon flow electrodes for continuous operation of capacitive deionization and capacitive mixing energy generation

    NARCIS (Netherlands)

    Porada, S.; Hamelers, H.V.M.; Bryjak, M.; Presser, V.; Biesheuvel, P.M.; Weingarth, D.

    2014-01-01

    Capacitive technologies, such as capacitive deionization and energy harvesting based on mixing energy (“capmix” and “CO2 energy”), are characterized by intermittent operation: phases of ion electrosorption from the water are followed by system regeneration. From a system application point of view, c

  16. Study of ultrasonic thermometry based on ultrasonic time-of-flight measurement

    OpenAIRE

    Ruixi Jia; Qingyu Xiong; Lijie Wang; Kai Wang; Xuehua Shen; Shan Liang; Xin Shi

    2016-01-01

    Ultrasonic thermometry is a kind of acoustic pyrometry and it has been evolving as a new temperature measurement technology for various environment. However, the accurate measurement of the ultrasonic time-of-flight is the key for ultrasonic thermometry. In this paper, we study the ultrasonic thermometry technique based on ultrasonic time-of-flight measurement with a pair of ultrasonic transducers for transmitting and receiving signal. The ultrasonic transducers are installed in a single path...

  17. Ion channels, phosphorylation and mammalian sperm capacitation.

    Science.gov (United States)

    Visconti, Pablo E; Krapf, Dario; de la Vega-Beltrán, José Luis; Acevedo, Juan José; Darszon, Alberto

    2011-05-01

    Sexually reproducing animals require an orchestrated communication between spermatozoa and the egg to generate a new individual. Capacitation, a maturational complex phenomenon that occurs in the female reproductive tract, renders spermatozoa capable of binding and fusing with the oocyte, and it is a requirement for mammalian fertilization. Capacitation encompasses plasma membrane reorganization, ion permeability regulation, cholesterol loss and changes in the phosphorylation state of many proteins. Novel tools to study sperm ion channels, image intracellular ionic changes and proteins with better spatial and temporal resolution, are unraveling how modifications in sperm ion transport and phosphorylation states lead to capacitation. Recent evidence indicates that two parallel pathways regulate phosphorylation events leading to capacitation, one of them requiring activation of protein kinase A and the second one involving inactivation of ser/thr phosphatases. This review examines the involvement of ion transporters and phosphorylation signaling processes needed for spermatozoa to achieve capacitation. Understanding the molecular mechanisms leading to fertilization is central for societies to deal with rising male infertility rates, to develop safe male gamete-based contraceptives and to preserve biodiversity through better assisted fertilization strategies.

  18. Ion channels, phosphorylation and mammalian sperm capacitation

    Institute of Scientific and Technical Information of China (English)

    Pablo E Visconti; Dario Krapf; José Luis de la Vega-Beltrán; Juan José Acevedo; Alberto Darszon

    2011-01-01

    Sexually reproducing animals require an orchestrated communication between spermatozoa and the egg to generate a new individual. Capacitation, a maturational complex phenomenon that occurs in the female reproductive tract, renders spermatozoa capable of binding and fusing with the oocyte, and it is a requirement for mammalian fertilization. Capacitation encompasses plasma membrane reorganization, ion permeability regulation, cholesterol loss and changes in the phosphorylation state of many proteins. Novel tools to study sperm ion channels, image intracellular ionic changes and proteins with better spatial and temporal resolution, are unraveling how modifications in sperm ion transport and phosphorylation states lead to capacitation. Recent evidence indicates that two parallel pathways regulate phosphorylation events leading to capacitation, one of them requiring activation of protein kinase A and the second one involving inactivation of ser/thr phosphatases. This review examines the involvement of ion transporters and phosphorylation signaling processes needed for spermatozoa to achieve capacitation. Understanding the molecular mechanisms leading to fertilization is central for societies to deal with rising male infertility rates, to develop safe male gamete-based contraceptives and to preserve biodiversity through better assisted fertilization strategies.

  19. Effect of fluorocarbon self-assembled monolayer films on sidewall adhesion and friction of surface micromachines with impacting and sliding contact interfaces

    Energy Technology Data Exchange (ETDEWEB)

    Xiang, H.; Komvopoulos, K. [Department of Mechanical Engineering, University of California, Berkeley, California 94720 (United States)

    2013-06-14

    A self-assembled monolayer film consisting of fluoro-octyltrichlorosilane (FOTS) was vapor-phase deposited on Si(100) substrates and polycrystalline silicon (polysilicon) surface micromachines. The hydrophobic behavior and structural composition of the FOTS film deposited on Si(100) were investigated by goniometry and X-ray photoelectron spectroscopy, respectively. The effects of contact pressure, relative humidity, temperature, and impact/sliding cycles on the adhesive and friction behavior of uncoated and FOTS-coated polysilicon micromachines (referred to as the Si and FOTS/Si micromachines, respectively) were investigated under controlled loading and environmental conditions. FOTS/Si micromachines demonstrated much lower and stable adhesion than Si micromachines due to the highly hydrophobic and conformal FOTS film. Contrary to Si micromachines, sidewall adhesion of FOTS/Si micromachines demonstrated a weak dependence on relative humidity, temperature, and impact cycles. In addition, FOTS/Si micromachines showed low and stable adhesion and low static friction for significantly more sliding cycles than Si micromachines. The adhesive and static friction characteristics of Si and FOTS/Si micromachines are interpreted in the context of physicochemical surface changes, resulting in the increase of the real area of contact and a hydrophobic-to-hydrophilic transition of the surface chemical characteristics caused by nanoscale surface smoothening and the removal of the organic residue (Si micromachines) or the FOTS film (FOTS/Si micromachines) during repetitive impact and oscillatory sliding of the sidewall surfaces.

  20. Mobile ultrasonic testing in pipes

    International Nuclear Information System (INIS)

    The paper deals with the development of the ultrasonic test method, in particular with the functioning of the impulse reflection method which is used for weld testing and wall thickness measurement in pipeline construction. The paper closes on a few remarks on ultrasonic testing in plastic tubes and some other special testing problems. (RW)

  1. Carbon nanofiber supercapacitors with large areal capacitances

    KAUST Repository

    McDonough, James R.

    2009-01-01

    We develop supercapacitor (SC) devices with large per-area capacitances by utilizing three-dimensional (3D) porous substrates. Carbon nanofibers (CNFs) functioning as active SC electrodes are grown on 3D nickel foam. The 3D porous substrates facilitate a mass loading of active electrodes and per-area capacitance as large as 60 mg/ cm2 and 1.2 F/ cm2, respectively. We optimize SC performance by developing an annealing-free CNF growth process that minimizes undesirable nickel carbide formation. Superior per-area capacitances described here suggest that 3D porous substrates are useful in various energy storage devices in which per-area performance is critical. © 2009 American Institute of Physics.

  2. A high performance, variable capacitance accelerometer

    Science.gov (United States)

    Wilner, L. Bruce

    1988-12-01

    A variable capacitance acceleration sensor is described. Manufactured using silicon microfabrication techniques, the sensor uses a midplane, flat plate suspension, gas damping, and overrange stops. The sensor is assembled from three silicon wafers, using anodic bonds to inlays of borosilicate glass. Typical sensor properties are 7-pF active capacitance, 3-pF tare capacitance, a response of 0.05 pF/G, a resonance frequency of 3.4 kHz, and damping 0.7 critical. It is concluded that this sensor, with appropriate electronics, forms an accelerometer with an order-of-magnitude greater sensitivity-bandwidth product than a comparable piezoresistive acclerometer, and with extraordinary shock resistance.

  3. Microphonics in biopotential measurements with capacitive electrodes.

    Science.gov (United States)

    Luna-Lozano, Pablo S; Pallas-Areny, Ramon

    2010-01-01

    Biopotential measurements with capacitive electrodes do not need any direct contact between electrode and skin, which saves the time devoted to expose and prepare the contact area when measuring with conductive electrodes. However, mechanical vibrations resulting from physiological functions such as respiration and cardiac contraction can change the capacitance of the electrode and affect the recordings. This transformation of mechanical vibrations into undesired electric signals is termed microphonics. We have evaluated microphonics in capacitive ECG recordings obtained from a dressed subject seated on a common chair with electrodes placed on the front side of the backrest of the chair. Depending on the softness of the backrest, the recordings may be clearly affected by the displacement of the thorax back wall due to the respiration and to the heart's mechanical activity.

  4. Analysis of the Micromachining Process of Dielectric and Metallic Substrates Immersed in Water with Femtosecond Pulses

    Directory of Open Access Journals (Sweden)

    Simas Butkus

    2015-12-01

    Full Text Available Micromachining of 1 mm thick dielectric and metallic substrates was conducted using femtosecond pulse generated filaments in water. Several hundred microjoule energy pulses were focused within a water layer covering the samples. Within this water layer, non-linear self-action mechanisms transform the beam, which enables higher quality and throughput micromachining results compared to focusing in air. Evidence of beam transformation into multiple light filaments is presented along with theoretical modeling results. In addition, multiparametric optimization of the fabrication process was performed using statistical methods and certain acquired dependencies are further explained and tested using laser shadowgraphy. We demonstrate that this micromachining process exhibits complicated dynamics within the water layer, which are influenced by the chosen parameters.

  5. THE SURFACE EFFECT ON THE TENSILE STRENGTH OF MICROMACHINED POLYSILICON FILMS FOR MEMS

    Institute of Scientific and Technical Information of China (English)

    Ding Jianning; Yang Jichang; Wen Shizhu

    2005-01-01

    In order to accomplish reliable mechanical design of MEMS, the influences of surface roughness and octadecyltrichlorosilane (OTS) self-assembled monolayers (SAMs) on the mechanical properties of micromachined polysilicon films for MEMS are investigated. Surface effect on the fracture properties of micromachined polysilicon films is evaluated with a new microtensile testing method using a magnet-coil force actuator. Statistical analysis of the surface roughness effects on the tensile strength predicated the surface roughness characterization of polysilicon films being tested and the direct relation of the mechanical properties with the surface roughness features. The fracture strength decreases with the increase of the surface roughness. The octadecyltrichlorosilane self-assembled monolayers coating leads to an increase of the average fracture strength up to 32.46%. Surface roughness and the hydrophobic properties of specimen when coated with OTS films are the two main factors influencing the tensile strength of micromachined polysilicon films for MEMS.

  6. Experimental and Theoretical Study of Young Modulus in Micromachined Polysilicon Films

    Institute of Scientific and Technical Information of China (English)

    丁建宁; 孟永钢; 温诗铸

    2002-01-01

    The elastic modulus is a very important mechanical property in micromachined structures. Several design issues such as resonant frequencies and stiffness in the micromachined structures are related to the elastic modulus. In addition, the accuracy of results from finite element models is highly dependent upon the elastic modulus. In this study, the Young modulus of micromachined thin polysilicon films has been investigated with a new tensile test machine using a magnetic-solenoid force actuator with linear response, low hysteresis, no friction and direct electrical control. The tensile test results show that the measured average value of Young modulus for a typical sample, (164±1.2) GPa, falls within the theoretical bounds of the texture model. These results will provide more reliable design of polysilicon microelectromechanical systems (MEMS).

  7. Ultrasonic inspection of austenitic welds

    International Nuclear Information System (INIS)

    The ultrasonic examination of austenitic stainless steel weld metal has always been regarded as a difficult proposition because of the large and variable ultrasonic attenuations and back scattering obtained from apparently similar weld deposits. The work to be described shows how the existence of a fibre texture within each weld deposit (as a result of epitaxial growth through successive weld beads) produces a systematic variation in the ultrasonic attenuation coefficient and the velocity of sound, depending upon the angle between the ultrasonic beam and the fibre axis. Development work has shown that it is possible to adjust the welding parameters to ensure that the crystallographic texture within each weld is compatible with improved ultrasonic transmission. The application of the results to the inspection of a specific weld in type 316 weld metal is described

  8. Ultrasonic Force Microscopies

    Science.gov (United States)

    Kolosov, Oleg; Briggs, Andrew

    Ultrasonic Force Microscopy, or UFM, allows combination of two apparently mutually exclusive requirements for the nanomechanical probe—high stiffness for the efficient indentation and high mechanical compliance that brings force sensitivity. Somewhat inventively, UFM allows to combine these two virtues in the same cantilever by using indention of the sample at high frequency, when cantilever is very rigid, but detecting the result of this indention at much lower frequency. That is made possible due to the extreme nonlinearity of the nanoscale tip-surface junction force-distance dependence, that acts as "mechanical diode" detecting ultrasound in AFM. After introducing UFM principles, we discuss features of experimental UFM implementation, and the theory of contrast in this mode, progressing to quantitative measurements of contact stiffness. A variety of UFM applications ranging from semiconductor quantum nanostructures, graphene, very large scale integrated circuits, and reinforced ceramics to polymer composites and biological materials is presented via comprehensive imaging gallery accompanied by the guidance for the optimal UFM measurements of these materials. We also address effects of adhesion and topography on the elasticity imaging and the approaches for reducing artifacts connected with these effects. This is complemented by another extremely useful feature of UFM—ultrasound induced superlubricity that allows damage free imaging of materials ranging from stiff solid state devices and graphene to biological materials. Finally, we proceed to the exploration of time-resolved nanoscale phenomena using nonlinear mixing of multiple vibration frequencies in ultrasonic AFM—Heterodyne Force Microscopy, or HFM, that also include mixing of ultrasonic vibration with other periodic physical excitations, eg. electrical, photothermal, etc. Significant section of the chapter analyzes the ability of UFM and HFM to detect subsurface mechanical inhomogeneities, as well as

  9. The pyramidal capacitated vehicle routing problem

    DEFF Research Database (Denmark)

    Lysgaard, Jens

    2010-01-01

    This paper introduces the pyramidal capacitated vehicle routing problem (PCVRP) as a restricted version of the capacitated vehicle routing problem (CVRP). In the PCVRP each route is required to be pyramidal in a sense generalized from the pyramidal traveling salesman problem (PTSP). A pyramidal....... A main feature of the algorithm is that exact pricing over elementary routes are done in pseudo-polynomial time. Computational results suggest that PCVRP solutions are highly useful for obtaining near-optimal solutions to the CVRP. Furthermore, pricing of pyramidal routes may prove to be very useful...

  10. Experimental study of negative capacitance in LEDs

    Institute of Scientific and Technical Information of China (English)

    FENG Lie-feng; WANG Jun; ZHU Chuan-yun; CONG Hong-xia; CHEN Yong; WANG Cun-da

    2005-01-01

    The experimental study on negative capacitance(NC) of various light-emitting diodes(LEDs) is presented.Experimental result shows that all LEDs display the NC phenomenon.The voltage modulated electroluminescence(VMEL) experiment confirms that the reason of negative capacitance is the strong recombination of the injected carriers in the active region of luminescence.The measures also verify that the dependence of NC on voltage and frequency in different LEDs is similar: NC phenomenon is more obvious with higher voltage or lower frequency.

  11. Design and simulation of MEMS capacitive magnetometer

    Science.gov (United States)

    Jyoti, Aditi, Tripathi, C. C.; Gopal, Ram

    2016-04-01

    This paper presents the design and simulation of a MEMS Capacitive Magnetometer using FEM (Finite Element Method) tool COMSOL Multiphysics 4.3b and results from this simulation are closely matched with analytically calculated results. A comb drive structure is used for actuation purpose which operates at resonant frequency of device is 11.791 kHz to achieve maximum displacement. A magnetic field in z-axis can be detected by this comb drive structure. Quality factor of MEMS capacitive magnetometer obtained is 18 and it has good linear response in the magnetic field range of 100 µT.

  12. Micromachining electrical grade steel using pulsed Nd-YAG lasers

    Directory of Open Access Journals (Sweden)

    M.J. Jackson

    2007-01-01

    Full Text Available Purpose: Multi-wavelength capability allows diode pumped, solid state (D.P.S.S. lasers to perform operationssuch as micro machining in a variety of materials such as ceramics, metals, and polymers. Results from thisstudy reveal how traditional plasma-controlling gases have a detrimental effect on the surface morphology ofmachined components. The paper explains how the machining of thin plates of silicon steel can benefit the rapidproduction of electrical components such as transformer cores and dynamo pole pieces.Design/methodology/approach: A series of experiments was performed to investigate how shielding gasenvironment and gas pressure affect the ability to cut and machine silicon steel. The experiments were designedto show the differences between the use of various assist gases that shield the machining zone.Findings: The results of the work indicate that oxygen shielding gases allow silicon steel to be machined at afaster rate than using helium, argon, and air. However, the surface roughness produced is highly dependent onassist gas used and the pressure at which it is delivered.Research limitations/implications: The results presented imply that assist gases perform a variety of functionsand further research is required to understand how the assist gases improve machinability when machiningdifferent workpiece materials.Practical implications: The practical implications of this research indicate that a significant amount of researcheffort is required to optimize the type of assist gas used in laser micromachining of engineering materials.Originality/value: The paper reveals how assist gases interact with both laser and the surface of workpiecematerials. It is of practical value to microengineers and micromachinists working in the field of micro andnanomanufacturing.

  13. Femtosecond laser micromachining of polyvinylidene fluoride (PVDF) based piezo films

    International Nuclear Information System (INIS)

    Piezoelectric polymers have been known to exist for more than 40 years, but in recent years they have been recognized as smart materials for the fabrication of microsensors, microactuators and other micro-electro-mechanical systems (MEMS). In this work, femtosecond laser micromachining of a polyvinylidene fluoride (PVDF) film, coated with NiCu on both sides, has been studied to understand selective patterning mechanisms of NiCu layers and ablation characteristics of PVDF films. A detailed characterization of morphological changes of the laser-irradiated areas has been investigated using scanning electron microscopy. Through morphological analysis, the multiple shot damage thresholds of a 28 µm thick PVDF film and 40 nm thick NiCu layer have been determined. Surface morphology examination indicates that NiCu layers are removed from the PVDF film through a sequence of cracking–peeling off-curling. In addition, the NiCu layer on the rear side was also removed by the partially transmitted laser energy. The PVDF film was removed in forms of bundles of filaments and solid fragments by a combination of pure ablation and explosive removal of material by bursting of bubbles; the role of the explosive removal becomes more dominant with the increase of laser fluence. Optimal process conditions for cutting of the PVDF film and patterning of the NiCu coating without damaging the PVDF polymer have been established and applied to fabricate a vibration microsensor prototype that shows significant potential in using PVDF-based functional microdevices for telecommunications, transportation and biomedical applications

  14. Micromachined infrared sensors with device-level encapsulation

    Science.gov (United States)

    Dave, Aasutosh; Celik-Butler, Zeynep; Butler, Donald P.

    2005-05-01

    There have been recent innovations to reduce the cost of packaging for MEMS devices, without deteriorating their performance. One such novel design for device-level encapsulation (self-packaged) of uncooled infrared (IR) microbolometers is documented here. Device-level vacuum encapsulation has the potential to eliminate some major problems associated with the bolometer performance such as high thermal conductance of the ambient atmosphere, the high cost associated with conventional vacuum packaging, and the degradation of optical transmission at different wavelengths through a conventional package window. The device-level encapsulated bolometers can also be fabricated with flexible substrates, which have the advantage of conforming to non-planar surfaces compared to Si or other rigid substrates. In addition, a flexible superstrate with low shear stress has applications in robotics, aerospace, defense and biomedicine as a "Smart skin", a name given to multisensory arrays on conformal substrates to emulate human skin functions on inanimate objects. Self-packaged uncooled microbolometer arrays of 40x40 μm2 and 60x60 μm2 are fabricated on top of Si wafer with a sacrificial layer using semiconducting Yttrium Barium Copper Oxide (YBCO) as the infrared sensing material. A two-layer surface micromachining technique in conjunction with a resonant cavity and a reflecting mirror are used for the sensor structure. The devices have demonstrated voltage responsivities of 7.9x103 V/W with a temperature coefficient of resistance of -2.5% K-1, and thermal conductivity of 2.95x10-6 W/K. The device performance was similar in air and vacuum, demonstrating vacuum integrity and a good device-level encapsulation.

  15. Micromachined fiber optic Fabry-Perot underwater acoustic probe

    Science.gov (United States)

    Wang, Fuyin; Shao, Zhengzheng; Hu, Zhengliang; Luo, Hong; Xie, Jiehui; Hu, Yongming

    2014-08-01

    One of the most important branches in the development trend of the traditional fiber optic physical sensor is the miniaturization of sensor structure. Miniature fiber optic sensor can realize point measurement, and then to develop sensor networks to achieve quasi-distributed or distributed sensing as well as line measurement to area monitoring, which will greatly extend the application area of fiber optic sensors. The development of MEMS technology brings a light path to address the problems brought by the procedure of sensor miniaturization. Sensors manufactured by MEMS technology possess the advantages of small volume, light weight, easy fabricated and low cost. In this paper, a fiber optic extrinsic Fabry-Perot interferometric underwater acoustic probe utilizing micromachined diaphragm collaborated with fiber optic technology and MEMS technology has been designed and implemented to actualize underwater acoustic sensing. Diaphragm with central embossment, where the embossment is used to anti-hydrostatic pressure which would largely deflect the diaphragm that induce interferometric fringe fading, has been made by double-sided etching of silicon on insulator. By bonding the acoustic-sensitive diaphragm as well as a cleaved fiber end in ferrule with an outer sleeve, an extrinsic Fabry-Perot interferometer has been constructed. The sensor has been interrogated by quadrature-point control method and tested in field-stable acoustic standing wave tube. Results have been shown that the recovered signal detected by the sensor coincided well with the corresponding transmitted signal and the sensitivity response was flat in frequency range from 10 Hz to 2kHz with the value about -154.6 dB re. 1/μPa. It has been manifest that the designed sensor could be used as an underwater acoustic probe.

  16. Molecular-Scale Lubricants for Micromachine Applications: Final Report

    Energy Technology Data Exchange (ETDEWEB)

    Burns, A.R.; Dugger, M.T.; Houston, J.E.; Lopez, G.P.; Mayer, T.M.; Michalske, T.A.; Miller, S.L.; Sniegowski, J.J.; Stevens, M.J.; Zhou, Y.

    1998-12-01

    The nature of this work was to develop the physics and chemistry base for understanding molecular-scale lubricants used to reduce of friction- and adhesion-induced failure in silicon micromachines (MEMS). We acquired this new knowledge by tailoring the molecular properties of the lubricants, applying local probes that can directly monitor the response of lubricants in contact conditions, and evaluating the performance of model lubricants MEMS devices. Model lubricants under investigation were the silane coupling agents that form monolayer films on native oxide silicon surfaces, which is the substrate in MEMS. These molecules bind via strong surface bonds and produce a layer of hydro- or fluoro-carbon chains normal to the substrate. "Tailoring" the lubricants entails modifying the chain length, the chain chemical reactivity (H or F), and the density of chain structures. Thus much effort went into understanding the surface chemistry of silane-silicon oxide coupling. With proximal probes such as atomic force microscopy (AFM), interracial force microscopy (FM), and shear force microscopy in combination with IFM, we examined the frictional and adhesive properties of the silane films with very high spatial resolution (< 100 nm) and sensitivity. MEMS structures are treated with silanes under identical conditions, and examined for friction and adhesion under operating conditions. Proper assessment of the lubricants required quantitative analysis of MEMS performance at high speeds and long operating times. Our proximal probe measurements and WS performance analyses form a very important link for future molecular dynamics simulations, that, in turn, should be able to predict MEMS performance under all conditions.

  17. Ultrasonic testing device

    International Nuclear Information System (INIS)

    The ultrasonic testing system serves to inspect welds and the adjoining heat-affected zones on reactor pressure vessels. The three-oscillator search unit has got either two external emitter crystal oscillators simultaneously loaded and an internal receiver crystal oscillator of equal width or vice versa. The inspection path is run through meanderingly. With the search unit there is succeeded to do the inspection by SEL technique, by SE technique with shear waves or by tandem technique. Loading of the oscillators is done with a time-multiplex method. (RW)

  18. DESIGN, FABRICATION, TESTING AND MECHANICAL ANALYSIS OF BULK-MICROMACHINED FLOWMETERS

    Institute of Scientific and Technical Information of China (English)

    Wang Xiaobao; Qian Jin; Zhang Dacheng

    2004-01-01

    Micromachined piezoresistive flowmeters with four different types of sensing structures have been designed, fabricated and tested. Piezoresistors were defined at the end of the sensors through p-diffusion, and their values were about 3.5 kΩ. Wheatstone bridge was configured with the piezoresistors in order to measure the output response. The output voltage increases with increasing flow rate of air, obeying determined relationships. The testing results show that the sensors that are designed for measuring 10L/M in full operational range have desired sensitivities. The sensor chip is manufactured with bulk-micromachining technologies, requiring a set of seven masks.

  19. Development of a 3D capacitive gyroscope with reduced parasitic capacitance

    International Nuclear Information System (INIS)

    We present the development of a technological platform dedicated to 3D capacitive inertial sensors. The proof of concept will be made on a 3D gyroscope. The mobile structure is made within a 30 µm thick Si top layer of a SOI substrate, while poly-Si deposited on top of a sacrificial PSG layer serves as suspended top electrodes and connection wires. This technology enables us to maintain low parasitic capacitance, which is of paramount significance for capacitive detection. After packaging and association with an analogue electronic board, functionality of the sensor is demonstrated. (paper)

  20. A wafer level vacuum encapsulated capacitive accelerometer fabricated in an unmodified commercial MEMS process.

    Science.gov (United States)

    Merdassi, Adel; Yang, Peng; Chodavarapu, Vamsy P

    2015-01-01

    We present the design and fabrication of a single axis low noise accelerometer in an unmodified commercial MicroElectroMechanical Systems (MEMS) process. The new microfabrication process, MEMS Integrated Design for Inertial Sensors (MIDIS), introduced by Teledyne DALSA Inc. allows wafer level vacuum encapsulation at 10 milliTorr which provides a high Quality factor and reduces noise interference on the MEMS sensor devices. The MIDIS process is based on high aspect ratio bulk micromachining of single-crystal silicon layer that is vacuum encapsulated between two other silicon handle wafers. The process includes sealed Through Silicon Vias (TSVs) for compact design and flip-chip integration with signal processing circuits. The proposed accelerometer design is sensitive to single-axis in-plane acceleration and uses a differential capacitance measurement. Over ±1 g measurement range, the measured sensitivity was 1 fF/g. The accelerometer system was designed to provide a detection resolution of 33 milli-g over the operational range of ±100 g. PMID:25815451

  1. A Wafer Level Vacuum Encapsulated Capacitive Accelerometer Fabricated in an Unmodified Commercial MEMS Process

    Directory of Open Access Journals (Sweden)

    Adel Merdassi

    2015-03-01

    Full Text Available We present the design and fabrication of a single axis low noise accelerometer in an unmodified commercial MicroElectroMechanical Systems (MEMS process. The new microfabrication process, MEMS Integrated Design for Inertial Sensors (MIDIS, introduced by Teledyne DALSA Inc. allows wafer level vacuum encapsulation at 10 milliTorr which provides a high Quality factor and reduces noise interference on the MEMS sensor devices. The MIDIS process is based on high aspect ratio bulk micromachining of single-crystal silicon layer that is vacuum encapsulated between two other silicon handle wafers. The process includes sealed Through Silicon Vias (TSVs for compact design and flip-chip integration with signal processing circuits. The proposed accelerometer design is sensitive to single-axis in-plane acceleration and uses a differential capacitance measurement. Over ±1 g measurement range, the measured sensitivity was 1fF/g. The accelerometer system was designed to provide a detection resolution of 33 milli-g over the operational range of ±100 g.

  2. Ultrasonic Inspection Of Welds On Tube Fittings

    Science.gov (United States)

    Ray, Arjun N.; Nummelin, John L.

    1996-01-01

    Scanning ultrasonic apparatus designed for use in nondestructive inspection of electron-beam welds between heat-exchanger tube and end fittings. Includes ultrasonic probe, scanning mechanism, ultrasonic-signal-generating and -processing circuits, and computers. Not necessary to immerse any part of apparatus or tube/fitting assembly in water during inspection. Output ultrasonic-test signals displayed on computer to reveal defects.

  3. Ultrasonic Flowmeter for JSFR

    International Nuclear Information System (INIS)

    The piping materials of the Japan Sodium-Cooled Fast Reactor (JSFR) at the commercialized stage, will be ferromagnetic materials Mod. 9-Cr steel. Therefore, it is not feasible to adopt the electromagnetic flowmeters used in conventional FBR plants. This paper describes the developmental status of the ultrasonic flowmeter system (USFM) as a substitute flow rate measurement system for JSFR. The features of the USFM are the following; - In consideration of the double wall piping structure of JSFR, ultrasonic transducers should be installed directly on the surface of the inner primary coolant piping. Therefore, the transducers should work properly under 395 oC at the rated power, and be replaced by a remote replacement system. - The transducer remote replacement system should maintain the air tightness between the inner primary coolant piping and the outer piping during the normal plant operation, apply appropriate pressure to the transducers against the inner primary coolant piping, and replace the transducers without removing the outer piping under the maitenance outage. - The multi-pass propagation time method is effective for detection of the flow rate in the short entrance region (in the short straight piping). The requirements of the signal processor are the following; Linearity and repeatability of the output signal : ± 2% or less of full scale; Fluctuation rate of the output signal : ± 5% or less of the median; Response : 0.3 s or less. - The USFM is designed as one of the safety protection system. (author)

  4. Ultrasonic flowmeter for JSFR

    International Nuclear Information System (INIS)

    The piping materials of the Japan Sodium-Cooled Fast Reactor (JSFR) at the commercialized stage, will be ferromagnetic materials Mod. 9-Cr steel.Therefore, it is not feasible to adopt the electromagnetic flowmeters used in conventional FBR plants. This paper describes the developmental status of the ultrasonic flowmeter system (USFM) as a substitute flow rate measurement system to JSFR. The features of the USFM are the following; In consideration of the double wall piping structure on JSFR, ultrasonic transducers should be installed directly on the surface of the inner primary coolant pipe. Therefore, the transducers should work properly under the temperature of 395 degrees Cat the rated power, and be replaced by remote replacement system; The transducer remote exchange system should maintain with air tightness between the inner primary coolant piping and the outer piping during the normal plant operation, apply appropriate pressure to the transducers against the inner primary coolant piping, and exchange the transducers without removing the outer piping under the maintenance outage; Multi-pass propagation time method is effective for detection of flow rate in the short entrance region (e.g. in the short straight piping) and the requirements of the signal processing equipment are the following; Linearity and repeatability of output signal : less than± 2% of Full Scale; Fluctuation rate of output signal : less than ± 5% of median; Response : less than 0.3 s; The USFM is designed as one of the Safety Protection System

  5. Ultrasonic Evaluation and Imaging

    Energy Technology Data Exchange (ETDEWEB)

    Crawford, Susan L.; Anderson, Michael T.; Diaz, Aaron A.; Larche, Michael R.; Prowant, Matthew S.; Cinson, Anthony D.

    2015-10-01

    Ultrasonic evaluation of materials for material characterization and flaw detection is as simple as manually moving a single-element probe across a speci-men and looking at an oscilloscope display in real time or as complex as automatically (under computer control) scanning a phased-array probe across a specimen and collecting encoded data for immediate or off-line data analyses. The reliability of the results in the second technique is greatly increased because of a higher density of measurements per scanned area and measurements that can be more precisely related to the specimen geometry. This chapter will briefly discuss applications of the collection of spatially encoded data and focus primarily on the off-line analyses in the form of data imaging. Pacific Northwest National Laboratory (PNNL) has been involved with as-sessing and advancing the reliability of inservice inspections of nuclear power plant components for over 35 years. Modern ultrasonic imaging techniques such as the synthetic aperture focusing technique (SAFT), phased-array (PA) technolo-gy and sound field mapping have undergone considerable improvements to effec-tively assess and better understand material constraints.

  6. Quantum capacitance of the armchair-edge graphene nanoribbon

    Indian Academy of Sciences (India)

    Ling-Feng Mao

    2013-08-01

    The quantum capacitance, an important parameter in the design of nanoscale devices, is derived for armchair-edge single-layer graphene nanoribbon with semiconducting property. The quantum capacitance oscillations are found and these capacitance oscillations originate from the lateral quantum confinement in graphene nanoribbon. Detailed studies of the capacitance oscillations demonstrate that the local channel electrostatic potential at the capacitance peak, the height and the number of the capacitance peak strongly depend on the width, especially a few nanometres, of the armchair-edge graphene nanoribbon. It implies that the capacitance oscillations observed in the experiments can be utilized to measure the width of graphene nanoribbon. The results also show that the capacitance oscillations are not seen when the width is larger than 30 nm.

  7. Analysis of mutual capacitance and inductance of printed circuit

    OpenAIRE

    Ivanov, V. G.

    2014-01-01

    The article analyzes the mutual capacitance and inductance of printed circuit and introduces an evaluation technique for conductor-to-conductor capacitance under electrical connections tracing, the technique based on a multi-layer channel model.

  8. Observation of Quantum Capacitance of individual single walled carbon nanotubes

    OpenAIRE

    Dai, Junfeng; Li, Jun; Zeng, Hualing; Cui, Xiaodong

    2008-01-01

    We report a measurement on quantum capacitance of individual semiconducting and small band gap SWNTs. The observed quantum capacitance is remarkably smaller than that originating from density of states and it implies a strong electron correlation in SWNTs.

  9. Thermodynamic cycle analysis for capacitive deionization

    NARCIS (Netherlands)

    Biesheuvel, P.M.

    2009-01-01

    Capacitive deionization (CDI) is an ion removal technology based on temporarily storing ions in the polarization layers of two oppositely positioned electrodes. Here we present a thermodynamic model for the minimum work required for ion separation in the fully reversible case by describing the ionic

  10. Capacitive Proximity Sensors With Additional Driven Shields

    Science.gov (United States)

    Mcconnell, Robert L.

    1993-01-01

    Improved capacitive proximity sensors constructed by incorporating one or more additional driven shield(s). Sensitivity and range of sensor altered by adjusting driving signal(s) applied to shield(s). Includes sensing electrode and driven isolating shield that correspond to sensing electrode and driven shield.

  11. Phase-Discriminating Capacitive Sensor System

    Science.gov (United States)

    Vranish, John M.; Rahim, Wadi

    1993-01-01

    Crosstalk eliminated by maintaining voltages on all electrodes at same amplitude, phase, and frequency. Each output feedback-derived control voltage, change of which indicates proximity-induced change in capacitance of associated sensing electrode. Sensors placed close together, enabling imaging of sort. Images and/or output voltages used to guide robots in proximity to various objects.

  12. Capacitive Displacement Sensor With Frequency Readout

    Science.gov (United States)

    Fritsch, Klaus

    1989-01-01

    Simple displacement-measuring circuit senses capacitance between two parallel conducting plates and produces output signal, with frequency proportional to distance between plates. Principle of circuit provides advantages over other methods because of frequency-encoded output and high linearity. Used to measure displacements.

  13. Site Specific Evaluation of Multisensor Capacitance Probes

    Science.gov (United States)

    Multisensor capacitance probes (MCPs) are widely used for measuring soil water content (SWC) at the field scale. Although manufacturers supply a generic MCP calibration, many researchers recognize that MCPs should be calibrated for specific field conditions. MCPs measurements are typically associa...

  14. Capacitors and Resistance-Capacitance Networks.

    Science.gov (United States)

    Balabanian, Norman; Root, Augustin A.

    This programed textbook was developed under a contract with the United States Office of Education as Number 5 in a series of materials for use in an electrical engineering sequence. It is divided into three parts--(1) capacitors, (2) voltage-current relationships, and (3) simple resistance-capacitance networks. (DH)

  15. Negative capacitance in multidomain ferroelectric superlattices

    Science.gov (United States)

    Zubko, Pavlo; Wojdeł, Jacek C.; Hadjimichael, Marios; Fernandez-Pena, Stéphanie; Sené, Anaïs; Luk’Yanchuk, Igor; Triscone, Jean-Marc; Íñiguez, Jorge

    2016-06-01

    The stability of spontaneous electrical polarization in ferroelectrics is fundamental to many of their current applications, which range from the simple electric cigarette lighter to non-volatile random access memories. Research on nanoscale ferroelectrics reveals that their behaviour is profoundly different from that in bulk ferroelectrics, which could lead to new phenomena with potential for future devices. As ferroelectrics become thinner, maintaining a stable polarization becomes increasingly challenging. On the other hand, intentionally destabilizing this polarization can cause the effective electric permittivity of a ferroelectric to become negative, enabling it to behave as a negative capacitance when integrated in a heterostructure. Negative capacitance has been proposed as a way of overcoming fundamental limitations on the power consumption of field-effect transistors. However, experimental demonstrations of this phenomenon remain contentious. The prevalent interpretations based on homogeneous polarization models are difficult to reconcile with the expected strong tendency for domain formation, but the effect of domains on negative capacitance has received little attention. Here we report negative capacitance in a model system of multidomain ferroelectric–dielectric superlattices across a wide range of temperatures, in both the ferroelectric and paraelectric phases. Using a phenomenological model, we show that domain-wall motion not only gives rise to negative permittivity, but can also enhance, rather than limit, its temperature range. Our first-principles-based atomistic simulations provide detailed microscopic insight into the origin of this phenomenon, identifying the dominant contribution of near-interface layers and paving the way for its future exploitation.

  16. Inside-out electrical capacitance tomography

    DEFF Research Database (Denmark)

    Kjærsgaard-Rasmussen, Jimmy; Meyer, Knud Erik

    2011-01-01

    In this work we demonstrate the construction of an ‘inside-out’ sensor geometry for electrical capacitance tomography (ECT). The inside-out geometry has the electrodes placed around a tube, as usual, but measuring ‘outwards’. The flow between the electrodes and an outer tube is reconstructed...

  17. Anisotropic magneto-capacitance in ferromagnetic-plate capacitors

    OpenAIRE

    Haigh, J. A.; Ciccarelli, C; Betz, A. C.; Irvine, A; Novák, V.; Jungwirth, T.; Wunderlich, J.

    2015-01-01

    The capacitance of a parallel plate capacitor can depend on applied magnetic field. Previous studies have identified capacitance changes induced via classical Lorentz force or spin-dependent Zeeman effects. Here we measure a magnetization direction dependent capacitance in parallel-plate capacitors where one plate is a ferromagnetic semiconductor, gallium manganese arsenide. This anisotropic magneto-capacitance is due to the anisotropy in the density of states dependent on the magnetization t...

  18. Membrane capacitance techniques to monitor granule exocytosis in neutrophils.

    OpenAIRE

    Lollike, K; Lindau, M

    1999-01-01

    Cell membranes behave like electrical capacitors and changes in cell capacitance therefore reflect changes in the cell area. Monitoring capacitance can thus be used to study dynamic cellular phenomenon involving rapid changes in cell surface, such as exo- and/or endocytosis. In this review focus is on the use of capacitance techniques to study exocytosis in human neutrophils. We compare the whole-cell and the cell-attached capacitance techniques, and we review the complete literature dealing ...

  19. Negative Quantum Capacitance of Carbon Nanotube Field-Effect Transistors

    OpenAIRE

    Latessa, L.; Pecchia, A.; Di Carlo, A.; P. Lugli

    2004-01-01

    Atomistic density functional theory (DFT) calculations of the capacitance between a metallic cylindric gate and a carbon nanotube (CNT) are reported. Results stressing the predominant effect of quantum capacitance in limiting or even enhancing screening properties of the CNT are shown. Other contributions to the quantum capacitance beyond the electronic density of state (DOS) are pointed out. Negative values of the quantum capacitance are obtained for low-density systems, which correspondingl...

  20. MOS Capacitance-Voltage Characteristics:V.Methods to Enhance the Trapping Capacitance

    Institute of Scientific and Technical Information of China (English)

    揭斌斌; 薩支唐

    2012-01-01

    Low-frequency and High-frequency Capacitance-Voltage (C-V) curves of Silicon Metal-Oxide-Semiconductor Capacitors,showing electron and hole trapping at shallow-level dopant and deep-level generationrecombination-trapping impurities,are presented to illustrate the enhancement of the giant trapping capacitances by physical means via device and circuit designs,in contrast to chemical means via impurity characteristics previously reported.Enhancement is realized by masking the electron or/and hole storage capacitances to make the trapping capacitances dominant at the terminals.Device and materials properties used in the computed CV curves are selected to illustrate experimental realizations for fundamental trapping parameter characterizations and for electrical and optical signal processing applications.

  1. Ultrasonic Transducer Irradiation Test Results

    International Nuclear Information System (INIS)

    Ultrasonic technologies offer the potential for high-accuracy and -resolution in-pile measurement of a range of parameters, including geometry changes, temperature, crack initiation and growth, gas pressure and composition, and microstructural changes. Many Department of Energy-Office of Nuclear Energy (DOE-NE) programs are exploring the use of ultrasonic technologies to provide enhanced sensors for in-pile instrumentation during irradiation testing. For example, the ability of small diameter ultrasonic thermometers (UTs) to provide a temperature profile in candidate metallic and oxide fuel would provide much needed data for validating new fuel performance models. Other ongoing efforts include an ultrasonic technique to detect morphology changes (such as crack initiation and growth) and acoustic techniques to evaluate fission gas composition and pressure. These efforts are limited by the lack of identified ultrasonic transducer materials capable of long term performance under irradiation test conditions. For this reason, the Pennsylvania State University (PSU) was awarded an ATR NSUF project to evaluate the performance of promising magnetostrictive and piezoelectric transducers in the Massachusetts Institute of Technology Research Reactor (MITR) up to a fast fluence of at least 1021 n/cm2. The goal of this research is to characterize and demonstrate magnetostrictive and piezoelectric transducer operation during irradiation, enabling the development of novel radiation-tolerant ultrasonic sensors for use in Material Testing Reactors (MTRs). As such, this test is an instrumented lead test and real-time transducer performance data is collected along with temperature and neutron and gamma flux data. The current work bridges the gap between proven out-of-pile ultrasonic techniques and in-pile deployment of ultrasonic sensors by acquiring the data necessary to demonstrate the performance of ultrasonic transducers. To date, one piezoelectric transducer and two

  2. Irradiation Testing of Ultrasonic Transducers

    International Nuclear Information System (INIS)

    Ultrasonic technologies offer the potential for high accuracy and resolution in-pile measurement of numerous parameters, including geometry changes, temperature, crack initiation and growth, gas pressure and composition, and microstructural changes. Many Department of Energy-Office of Nuclear Energy (DOE-NE) programs are exploring the use of ultrasonic technologies to provide enhanced sensors for in-pile instrumentation during irradiation testing. For example, the ability of single, small diameter ultrasonic thermometers (UTs) to provide a temperature profile in candidate metallic and oxide fuel would provide much needed data for validating new fuel performance models. Other efforts include an ultrasonic technique to detect morphology changes (such as crack initiation and growth) and acoustic techniques to evaluate fission gas composition and pressure. These efforts are limited by the lack of existing knowledge of ultrasonic transducer material survivability under irradiation conditions. To address this need, the Pennsylvania State University (PSU) was awarded an Advanced Test Reactor National Scientific User Facility (ATR NSUF) project to evaluate promising magnetostrictive and piezoelectric transducer performance in the Massachusetts Institute of Technology Research Reactor (MITR) up to a fast fluence of at least 1021 n/cm2 (E> 0.1 MeV). This test will be an instrumented lead test; and real-time transducer performance data will be collected along with temperature and neutron and gamma flux data. By characterizing magnetostrictive and piezoelectric transducer survivability during irradiation, test results will enable the development of novel radiation tolerant ultrasonic sensors for use in Material and Test Reactors (MTRs). The current work bridges the gap between proven out-of-pile ultrasonic techniques and in-pile deployment of ultrasonic sensors by acquiring the data necessary to demonstrate the performance of ultrasonic transducers. (authors)

  3. Ultrasonic Transducer Irradiation Test Results

    Energy Technology Data Exchange (ETDEWEB)

    Daw, Joshua [Idaho National Lab. (INL), Idaho Falls, ID (United States); Palmer, Joe [Idaho National Lab. (INL), Idaho Falls, ID (United States); Ramuhalli, Pradeep [Pacific Northwest National Lab. (PNNL), Richland, WA (United States); Keller, Paul [Pacific Northwest National Lab. (PNNL), Richland, WA (United States); Montgomery, Robert [Pacific Northwest National Lab. (PNNL), Richland, WA (United States); Chien, Hual-Te [Argonne National Lab. (ANL), Argonne, IL (United States); Kohse, Gordon [MIT (Massachusetts Inst. of Technology), Cambridge, MA (United States); Tittmann, Bernhard [Pennsylvania State Univ., University Park, PA (United States); Reinhardt, Brian [Pennsylvania State Univ., University Park, PA (United States); Rempe, Joy [Rempe and Associates, Idaho Falls, ID (United States)

    2015-02-01

    Ultrasonic technologies offer the potential for high-accuracy and -resolution in-pile measurement of a range of parameters, including geometry changes, temperature, crack initiation and growth, gas pressure and composition, and microstructural changes. Many Department of Energy-Office of Nuclear Energy (DOE-NE) programs are exploring the use of ultrasonic technologies to provide enhanced sensors for in-pile instrumentation during irradiation testing. For example, the ability of small diameter ultrasonic thermometers (UTs) to provide a temperature profile in candidate metallic and oxide fuel would provide much needed data for validating new fuel performance models. Other ongoing efforts include an ultrasonic technique to detect morphology changes (such as crack initiation and growth) and acoustic techniques to evaluate fission gas composition and pressure. These efforts are limited by the lack of identified ultrasonic transducer materials capable of long term performance under irradiation test conditions. For this reason, the Pennsylvania State University (PSU) was awarded an ATR NSUF project to evaluate the performance of promising magnetostrictive and piezoelectric transducers in the Massachusetts Institute of Technology Research Reactor (MITR) up to a fast fluence of at least 1021 n/cm2. The goal of this research is to characterize and demonstrate magnetostrictive and piezoelectric transducer operation during irradiation, enabling the development of novel radiation-tolerant ultrasonic sensors for use in Material Testing Reactors (MTRs). As such, this test is an instrumented lead test and real-time transducer performance data is collected along with temperature and neutron and gamma flux data. The current work bridges the gap between proven out-of-pile ultrasonic techniques and in-pile deployment of ultrasonic sensors by acquiring the data necessary to demonstrate the performance of ultrasonic transducers. To date, one piezoelectric

  4. Irradiation Testing of Ultrasonic Transducers

    Energy Technology Data Exchange (ETDEWEB)

    Daw, Joshua; Tittmann, Bernhard; Reinhardt, Brian; Kohse, Gordon E.; Ramuhalli, Pradeep; Montgomery, Robert O.; Chien, Hual-Te; Villard, Jean-Francois; Palmer, Joe; Rempe, Joy

    2014-07-30

    Ultrasonic technologies offer the potential for high accuracy and resolution in-pile measurement of a range of parameters, including geometry changes, temperature, crack initiation and growth, gas pressure and composition, and microstructural changes. Many Department of Energy-Office of Nuclear Energy (DOE-NE) programs are exploring the use of ultrasonic technologies to provide enhanced sensors for in-pile instrumentation during irradiation testing. For example, the ability of single, small diameter ultrasonic thermometers (UTs) to provide a temperature profile in candidate metallic and oxide fuel would provide much needed data for validating new fuel performance models. Other efforts include an ultrasonic technique to detect morphology changes (such as crack initiation and growth) and acoustic techniques to evaluate fission gas composition and pressure. These efforts are limited by the lack of existing knowledge of ultrasonic transducer material survivability under irradiation conditions. For this reason, the Pennsylvania State University (PSU) was awarded an Advanced Test Reactor National Scientific User Facility (ATR NSUF) project to evaluate promising magnetostrictive and piezoelectric transducer performance in the Massachusetts Institute of Technology Research Reactor (MITR) up to a fast fluence of at least 1021 n/cm2 (E> 0.1 MeV). The goal of this research is to characterize magnetostrictive and piezoelectric transducer survivability during irradiation, enabling the development of novel radiation tolerant ultrasonic sensors for use in Material and Test Reactors (MTRs). As such, this test will be an instrumented lead test and real-time transducer performance data will be collected along with temperature and neutron and gamma flux data. The current work bridges the gap between proven out-of-pile ultrasonic techniques and in-pile deployment of ultrasonic sensors by acquiring the data necessary to demonstrate the performance of ultrasonic transducers.

  5. A capacitive power sensor based on the MEMS cantilever beam fabricated by GaAs MMIC technology

    International Nuclear Information System (INIS)

    In this paper, a novel capacitive power sensor based on the microelectromechanical systems (MEMS) cantilever beam at 8–12 GHz is proposed, fabricated and tested. The presented design can not only realize a cantilever beam instead of the conventional fixed–fixed beam, but also provide fine compatibility with the GaAs monolithic microwave integrated circuit (MMIC) process. When the displacement of the cantilever beam is very small compared with the initial height of the air gap, the capacitance change between the measuring electrode and the cantilever beam has an approximately linear dependence on the incident radio frequency (RF) power. Impedance compensating technology, by modifying the slot width of the coplanar waveguide transmission line, is adopted to minimize the effect of the cantilever beam on the power sensor; its validity is verified by the simulation of high frequency structure simulator software. The power sensor has been fabricated successfully by Au surface micromachining using polyimide as the sacrificial layer on the GaAs substrate. Optimization of the design with impedance compensating technology has resulted in a measured return loss of less than −25 dB and an insertion loss of around 0.1 dB at 8–12 GHz, which shows the slight effect of the cantilever beam on the microwave performance of this power sensor. The measured capacitance change starts from 0.7 fF to 1.3 fF when the incident RF power increases from 100 to 200 mW and an approximate linear dependence has been obtained. The measured sensitivities of the sensor are about 6.16, 6.27 and 6.03 aF mW−1 at 8, 10 and 12 GHz, respectively. (paper)

  6. Winding Capacitance Dividing Method for Powerformer

    Institute of Scientific and Technical Information of China (English)

    TIAN Qing; LIN Xiang-ning; LI Jian-jian; TAO Yong-hong

    2008-01-01

    It presents a method which can equivalently arrange the capacitance distribution along with the winding ofthe generator on the terminal and neutral respectively in a reasonable partition, particularly for a type of high-voltagegraded insulated cable wound generator, Powerformer. The winding of the Powerformer adopts graded insulation,which leads to the various cable thicknesses in different portion of the winding, and thus, the uneven capacitancedistribution. The large capacitive currents and large transient outrush currents resulting from the cable consisting ofthe stator winding of Powerformer may cause problems to the generator differential protection. Most of literatures a-vailable in the field of compensated differential protection focus on the charging current compensation for long trans-mission line, instead of for generator. The authors give a method which can be used to compensate the capacitivecurrent wholly to improve the reliability of the differential protection of Powerformer. It is proved that the distribu-ted capacitance can be equivalent as the lump circuit with a capacitance partition coefficient p, and p is proved as aconstant no matter whether the generator experiences the normal operation, external phase(s) fault or internal phase(s) fault. The formula of the partition coefficient is provided and the corresponding equivalent circuit of the Power-former cable to calculate capacitance currents is given. An analysis programming resolving the minimum value of thecoefficient p is written in MATLAB 7. 0/m according to this formula, using the function fmincon() which can workin any type of constraint condition. The program always gets the same global minimum points under the different in-itial values condition which proves our point by mathematical test. With this new approach to winding capacitancedividing method, the protection scheme used for Powerformer can be validated and improved accordingly.

  7. Electric field theory and the fallacy of void capacitance

    OpenAIRE

    McAllister, Iain Wilson

    1991-01-01

    The concept of the capacitance of a gaseous void is discussed as applied to electrical insulation science. The most pertinent aspect of the capacitance definition is that of reference to a single-valued potential difference between surfaces. This implies that these surfaces must be surfaces of equipotential. With this essential characteristics the validity of void capacitance is examined

  8. Pulsed ultrasonic stir welding method

    Science.gov (United States)

    Ding, R. Jeffrey (Inventor)

    2013-01-01

    A method of performing ultrasonic stir welding uses a welding head assembly to include a plate and a rod passing through the plate. The rod is rotatable about a longitudinal axis thereof. In the method, the rod is rotated about its longitudinal axis during a welding operation. During the welding operation, a series of on-off ultrasonic pulses are applied to the rod such that they propagate parallel to the rod's longitudinal axis. At least a pulse rate associated with the on-off ultrasonic pulses is controlled.

  9. Fundamentals of ultrasonic phased arrays

    CERN Document Server

    Schmerr, Lester W

    2014-01-01

    This book describes in detail the physical and mathematical foundations of ultrasonic phased array measurements.?The book uses linear systems theory to develop a comprehensive model of the signals and images that can be formed with phased arrays. Engineers working in the field of ultrasonic nondestructive evaluation (NDE) will find in this approach a wealth of information on how to design, optimize and interpret ultrasonic inspections with phased arrays. The fundamentals and models described in the book will also be of significant interest to other fields, including the medical ultrasound and

  10. Properties of ultrasonic testing systems

    International Nuclear Information System (INIS)

    For a long time, ultrasonic testing of reactor components and plants whose safety had to meet high demands, lacked definitions of the required properties of the ultrasonic testing system. The standard draft DIN 25 450 states demands on the ultrasonic testing unit and the test heads and recommends measuring methods to determine their properties. With test units and test heads meeting the demands of the draft a better reproducibility of the test is obtained than before; the improved test statement results in an increased safety during production and operation of components and plants. (orig./HP)

  11. Silicon micromachined pumps employing piezoelectric membrane actuation for microfluidic systems

    Science.gov (United States)

    Koch, Michael

    Microsystems technology is a rapidly expanding area that comprises electronics, mechanics and optics. In this field, physical/chemical sensing, fluid handling and optical communication are emerging as potential markets. Microfluidic systems like an implantable insulin pump, a drug delivery system and a total chemical analysis system are currently being developed by academia and industry around the world. This project contributes to the area of microfluidics in that a novel thick-film-on-silicon membrane actuator has been developed to allow inexpensive mass production of micropumps. To date piezoelectric plates have been surface mounted onto a silicon membrane. This single chip fabrication method can now be replaced by screen printing thick piezoelectric layers onto 4 inch silicon substrates. Two different pump types have been developed. These are membrane pumps with either cantilever valves or diffuser/nozzle valves. Pump rates between 100 and 200 μl min-1 and backpressures up to 4 kPa have been achieved with these pumps. Along with the technology of micropumps, simulators have been developed. A novel coupled FEM-CFD solver was realised by a computer controlled coupling of two commercially available packages (ANSYS and CFX-Flow3D). The results of this simulator were in good agreement with measurements on micromachined cantilever valves. CFX- Flow3D was also used to successfully model the behaviour of the diffuser/nozzle valve. Finally, the pump has been simulated using a continuity equation. A behavioural dynamic extension of the cantilever valve was necessary to achieve better prediction of the pump rates for higher frequencies. As well, a common process has been developed for microfluidic devices like micromixers, particle counters and sorters as well as flow sensors. The micromixer has been tested already and achieves mixing for input pressures between 2 and 7 kPa. This agrees with simulations of the diffusive mixing with CFX-Flow3D. Together with the micropump

  12. High aspect ratio transmission line circuits micromachined in silicon

    Science.gov (United States)

    Todd, Shane Truman

    The performance of complimentary metal-oxide-semiconductor (CMOS) monolithic microwave integrated circuits (MMICs) fabricated on silicon has improved dramatically. The scaling down of silicon transistors has increased the maximum frequency of transistors to the point where silicon MMICs have become a viable alternative to compound semiconductor MMICs in certain applications. A fundamental problem still exists in silicon MMICs however in that transmission lines fabricated on silicon can suffer from high loss due to the finite conductivity of the silicon substrate. A novel approach for creating low-loss transmission lines on silicon is presented in this work. Low-loss transmission lines are created on low resistivity silicon by using a micromachining method that combines silicon deep reactive ion etching (DRIE), thermal oxidation, electroplating, and planarization. Two types of high aspect ratio transmission lines are created with this method including high aspect ratio coplanar waveguide (hicoplanar) and semi-rectangular coaxial (semicoaxial). Transmission lines with impedances ranging from 20--80 O have been fabricated with minimum measured loss lower than 1 dB/cm at 67 GHz. Low-loss dielectrics are created for the high aspect ratio transmission lines using the mesa merging method. The mesa merging method works by creating silicon mesa arrays using DRIE and then converting and merging the mesa arrays into a solid oxide dielectric using thermal oxidation. The transmission lines are designed so that the fields penetrate the low-loss oxide dielectric and are isolated from the lossy silicon substrate. The mesa merging method has successfully created large volume oxide with depth up to 65 microm and width up to 240 microm in short oxidation times. Other advantages of the high aspect ratio transmission lines are demonstrated including low-loss over a wide impedance range, high isolation, and high coupling for coupled-line circuits. Transmission line models have been

  13. Influence of ultrasonic cavitation on passive film of stainless steel.

    Science.gov (United States)

    Wang, Bao-Cheng; Zhu, Jin-hua

    2008-03-01

    The electrochemical behaviors of passive film of stainless steel 0Cr13Ni5Mo under the condition of static state (quiescence) and ultrasonic cavitation in the HCl solution have been studied by means of polarization curve, electrochemical impedance spectroscopy (EIS) and capacitance potential measurement. The results indicate that the passive film shows a multi layer structure distribution, and presents a p-type semiconductor property under the condition of quiescence. The stability of passive film decreases, the semiconducting property changes to an n-type semiconductor in the presence of cavitation. The amount of transition electrons from valence band because of cavitation is related to the height of Fermi level of passive film semiconductor. PMID:17584517

  14. Air-coupled ultrasonic evaluation of food materials.

    Science.gov (United States)

    Pallav, P; Hutchins, D A; Gan, T H

    2009-02-01

    This research was performed with the aim of detecting foreign bodies and additives within food products, and to measure selected acoustic properties, without contact to the sample. This would allow use in manufacturing plants on production lines, where contacting the product for ultrasonic inspection would not be feasible. Images of internal structure are reported. The air-coupled system uses capacitive devices which are able to provide sufficient bandwidth for many measurements, including the detection of foreign bodies in cheese, the detection of deliberate additives to chocolate, the detection of fill level and content of metallic food cans, and measurements of frozen dough products. The approach demonstrates that ultrasound has the potential for application to many industrial food packaging environments where non-metallic objects within food need to be detected. PMID:18973911

  15. Separation and Detection of Toxic Gases with a Silicon Micromachined Gas Chromatography System

    Science.gov (United States)

    Kolesar, Edward S.; Reston, Rocky R.

    1995-01-01

    A miniature gas chromatography (GC) system was designed and fabricated using silicon micromachining and integrated circuit (IC) processing techniques. The silicon micromachined gas chromatography system (SMGCS) is composed of a miniature sample injector that incorporates a 10 microliter sample loop; a 0.9 meter long, rectangular shaped (300 micrometer width and 10 micrometer height) capillary column coated with a 0.2 micrometer thick copper phthalocyanine (CuPc) stationary phase; and a dual detector scheme based upon a CuPc-coated chemiresistor and a commercially available 125 micrometer diameter thermal conductivity detector (TCD) bead. Silicon micromachining was employed to fabricate the interface between the sample injector and the GC column, the column itself, and the dual detector cavity. A novel IC thin-film processing technique was developed to sublime the CuPc stationary phase coating on the column walls that were micromachined in the host silicon wafer substrate and Pyrex (r) cover plate, which were then electrostatically bonded together. The SMGCS can separate binary gas mixtures composed of parts-per-million (ppm) concentrations of ammonia (NH3) and nitrogen dioxide (NO2) when isothermally operated (55-80 degrees C). With a helium carrier gas and nitrogen diluent, a 10 microliter sample volume containing ammonia and nitrogen dioxide injected at 40 psi ((2.8 x 10(exp 5)Pa)) can be separated in less than 30 minutes.

  16. New technique for fabrication of high frequency piezoelectric Micromachined Ultrasound Transducers

    DEFF Research Database (Denmark)

    Pedersen, T; Thomsen, Erik Vilain; Zawada, T;

    2008-01-01

    A novel technique for fabrication of linear arrays of high frequency piezoelectric Micromachined Ultrasound Transducers (pMUT) on silicon substrates is presented. Piezoelectric elements are formed by deposition of PZT ((PbZrxTi1-x)O3) into etched features of the silicon substrate...

  17. Thermal simulation of surface micromachined polysilicon hot plates of low power consumption

    NARCIS (Netherlands)

    Dumitrescu, Marius; Cobianu, Cornel; Lungu, Dan; Pascu, Adrian; Kolev, Spas; Berg, van den Albert

    1999-01-01

    A simple, IC compatible, surface micromachined polysilicon membrane was technologically designed and thermally simulated by 3D finite element ‘COSMOS' program in order to investigate its capability to work as a micro hot plate for a gas sensing test structure of low power consumption. For an optimiz

  18. Micro-machining workstation for a diode pumped Nd:YAG high-brightness laser system

    NARCIS (Netherlands)

    Kleijhorst, R.A.; Offerhaus, H.L.; Bant, P.

    1998-01-01

    A Nd:YAG micro-machining workstation that allows cutting on a scale of a few microns has been developed and operated. The system incorporates a telescope viewing system that allows control during the work and a software interface to translate AutoCad files. Some examples of the performance are given

  19. Long-life micro vacuum chamber for a micromachined cryogenic cooler

    NARCIS (Netherlands)

    Cao, H.; Vermeer, C.H.; Vanapalli, S.; Holland, H.J.; Brake, ter H.J.M.

    2015-01-01

    Micromachined cryogenic coolers can be used for cooling small electronic devices to improve their performance. However, for reaching cryogenic temperatures, they require a very good thermal insulation from the warm environment. This is established by a vacuum space that for adequate insulation has t

  20. Optical micro-metrology of structured surfaces micro-machined by jet-ECM

    DEFF Research Database (Denmark)

    Quagliotti, Danilo; Tosello, Guido; Islam, Aminul;

    2015-01-01

    A procedure for statistical analysis and uncertainty evaluation is presented with regards to measurements of step height and surface texture. Measurements have been performed with a focus-variation microscope over jet electrochemical micro-machined surfaces. Traceability has been achieved using a...

  1. Optical micro-metrology of structured surfaces micro-machined by jet-ECM

    DEFF Research Database (Denmark)

    Quagliotti, Danilo; Tosello, Guido; Islam, Aminul;

    A procedure for statistical analysis and uncertainty evaluation is presented with regards to measurements of step height and surface texture. Measurements have been performed with a focus-variation microscope over jet electrochemical micro-machined surfaces. Traceability has been achieved using a...

  2. First micromachined silicon load cell for loads up to 1000 kg

    NARCIS (Netherlands)

    Wensink, H.; Boer, de M.J.; Wiegerink, R.J.; Zwijze, R.A.F.; Elwenspoek, M.C.; French, Patrick J.; Chau, Kevin H.

    1998-01-01

    In this paper, a bulk micromachined silicon load cell is presented, designed for loads up to 1000 kg. ANSYS simulations were used to determine the load cell dimensions and strain gauge positions. The load cell consists of two parts, which are bonded to each other using Low Temperature Silicon Direct

  3. Two-dimensional differential adherence of neuroblasts in laser micromachined CAD/CAM agarose channels

    Energy Technology Data Exchange (ETDEWEB)

    Doraiswamy, A. [Georgia Institute of Technology, School of Material Science and Engineering, Atlanta, GA 30332 (United States); Patz, T. [Georgia Institute of Technology, School of Material Science and Engineering, Atlanta, GA 30332 (United States); Narayan, R.J. [Georgia Institute of Technology, School of Material Science and Engineering, Atlanta, GA 30332 (United States); Dinescu, M. [National Institute for Laser, Plasma and Radiation Physics, P.O. Box MG-16 Magurele, 077125 Bucharest (Romania); Modi, R. [US Naval Research Laboratory, Washington, DC 20375-5345 (United States); Auyeung, R.C.Y. [US Naval Research Laboratory, Washington, DC 20375-5345 (United States); Chrisey, D.B. [US Naval Research Laboratory, Washington, DC 20375-5345 (United States)

    2006-04-30

    Laser micromachining of hydrophobic gels into CAD/CAM patterns was used to develop differentially adherent surfaces and induce the attachment of B35 rat neuroblasts that would later form engineered nerve bundles. Narrow channels, 60-400 {mu}m wide, were micromachined in a 2% agarose gel using an ArF laser, and subsequently filled with an extracellular matrix gel. Upon the addition of 1 ml of a 2 x 104 cells/ml neuroblast suspension, the cells selectively adhered to the ECM-lined channels in a non-confluent manner and we monitored their growth at various time points. The adherent neuroblasts were fluorescently imaged with a propidium iodide live/dead assay, which revealed that the cells were alive within the channels. After 72 h growth, the neuroblasts grew, proliferated, and differentiated into nerve bundles. The fully grown 1 cm long nerve bundle organoids maintained an aspect ratio on the order of 100. The results presented in this paper provide the foundation for laser micromachining technique to develop bioactive substrates for development of three-dimensional tissues. Laser micromachining offers rapid prototyping of substrates, excellent resolution, control of pattern depth and dimensions, and ease of fabrication.

  4. Two-dimensional differential adherence of neuroblasts in laser micromachined CAD/CAM agarose channels

    International Nuclear Information System (INIS)

    Laser micromachining of hydrophobic gels into CAD/CAM patterns was used to develop differentially adherent surfaces and induce the attachment of B35 rat neuroblasts that would later form engineered nerve bundles. Narrow channels, 60-400 μm wide, were micromachined in a 2% agarose gel using an ArF laser, and subsequently filled with an extracellular matrix gel. Upon the addition of 1 ml of a 2 x 104 cells/ml neuroblast suspension, the cells selectively adhered to the ECM-lined channels in a non-confluent manner and we monitored their growth at various time points. The adherent neuroblasts were fluorescently imaged with a propidium iodide live/dead assay, which revealed that the cells were alive within the channels. After 72 h growth, the neuroblasts grew, proliferated, and differentiated into nerve bundles. The fully grown 1 cm long nerve bundle organoids maintained an aspect ratio on the order of 100. The results presented in this paper provide the foundation for laser micromachining technique to develop bioactive substrates for development of three-dimensional tissues. Laser micromachining offers rapid prototyping of substrates, excellent resolution, control of pattern depth and dimensions, and ease of fabrication

  5. Micromachined vertical Hall magnetic field sensor in standard complementary metal oxide semiconductor technology

    Science.gov (United States)

    Paranjape, M.; Ristic, Lj.

    1992-06-01

    A novel 2D micromachined vertical Hall magnetic field sensor structure has been designed and fabricated using a commercially available 3 micron CMOS process. The device can detect two magnetic field components in the plane of the chip surface. The sensor exhibits a linear response and shows no cross-sensitivity between channels.

  6. Sensitivity of Micromachined Joule-Thomson Cooler to Clogging Due to Moisture

    NARCIS (Netherlands)

    Cao, H.; Vanapalli, S.; Holland, H.J.; Vermeer, C.H.; Brake, ter H.J.M.

    2015-01-01

    A major issue in long-term operation of micromachined Joule-Thomson coolers is the clogging of the microchannels and/or the restriction due to the deposition of water molecules present in the working fluid. In this study, we present the performance of a microcooler operated with nitrogen gas with di

  7. A practical ultrasonic plethysmograph

    Science.gov (United States)

    Wu, V. C.; Nickell, W. T.; Bhagat, P. K.

    1982-01-01

    An ultrasonic plethysmograph, which gives improved performance over the standard Whitney Strain Gauge, is described. This instrument monitors dimension changes in human limbs by measuring the transit times of acoustic pulses across two chords of the limb. In the case of a small uniform expansion, the percentage change in limb volume is shown to be proportional to twice the percentage change in either of the measured chords. Measurement of two chords allows correction for possible non-uniform expansion. In addition, measurement of two chords allows an estimate of the absolute cross-sectional area of the limb. The developed instrument incorporates a microprocessor, which performs necessary calculation and control functions. Use of the microprocessor allows the instrument to be self-calibrating. In addition, the device can be easily reprogrammed to incorporate improvements in operating features or computational schemes.

  8. Ultrasonic inspection methodology

    International Nuclear Information System (INIS)

    Steam generator tubes are known to be susceptible to stress corrosion cracking (SCC). Primary water SCC (PWSCC) and more recently secondary water SCC (SWSCC) have been observed in some Belgian plants. To help dealing with these problems, Laborelec developed an ultrasonic (UT) inspection system. It has been used for the last two years on a sampling basis in several plants. The field and laboratory measurements confirmed the advantage of using UT for the early detection of small circumferential cracks while an excellent correlation was demonstrated between eddy current RPC and UT for axial PWSCC. In conclusion: The latest in-service inspections demonstrated an average measurement cycle of 50 to 60 seconds per tube including the manipulator displacement from tube to tube. A sample of about 250 tubes with axial cracks was measured on-site with the eddy current RPC technique and the new UT system. All the UT measured lengths were within ± 1.5 mm of the RPC results. The same results were obtained from the inspection of the tubes repaired with the nickel process (Doel 3). Some indications of circumferential secondary side stress corrosion cracking were recently observed. A comparison with the eddy current rotating pancake coil confirmed the improved detectability of the UT system. The field and laboratory results obtained with this UT inspection system demonstrated the advantage of applying the ultrasonic technique for the detection and sizing of small volume cracks like SCC. Also, the small focal spot of the UT beam provided a clear advantage for the detection of circumferential PWSCC in the presence of multiple axial cracks. With an average rate dose to 60 tubes per hour for the top of the tubesheet area, this UT system can be considered as an industrial tool for the inspection of steam generator tubes

  9. Studies of ultrasonic dehydration efficiency

    Institute of Scientific and Technical Information of China (English)

    Vladimir N. KHMELEV; Andrey V. SHALUNOV; Roman V. BARSUKOV; Denis S. ABRAMENKO; Andrey N. LEBEDEV

    2011-01-01

    The aim of this investigation was to define the effectiveness of non-contact drying using ultrasonic vibrations. Disk radiators were used for carrying out experiments, and a special drying chamber was designed to provide resonant amplification of ultrasonic vibrations (from 130 to 150 dB). Drying of ginseng and other vegetables demonstrated that the application of ultrasonic vibrations reduced power inputs by 20% in comparison with convective drying. It also led to a decrease of 6% in final moisture content, if the duration of drying was constant. The level of intensification of ultrasonic drying was high (up to 50 g for 1 kg of drying material), which helped to lower the temperature of the drying agent and improve the quality of the dried products.

  10. Tools for ultrasonic hot embossing

    OpenAIRE

    Liao, Sijie

    2016-01-01

    Ultrasonic hot embossing is an emerging technology enabling molding of thermo-plastic polymers in seconds. A stack of polymer foils is heated by the friction between the foils and protruding microstructures on a tool when ultrasonic vibrations are generated by a sonotrode. The polymer is molten and adapts to the shape of the microstructures on the tool. Thus, a micro structure is generated in much shorter time than by injection molding or hot embossing. The objective of this work was investig...

  11. Ultrasonic Evaluation of Well Integrity

    OpenAIRE

    Hoel, Kristian

    2014-01-01

    This thesis presents the acoustic theory behind current ultrasonic cement evaluation tools. The UltraSonic Imager tool's pulse echo technique and the new Isolation Scanner tool's pitch-catch leaky lamb wave measuring technique is explained. A laboratory experiment is conducted on a steel casing set-up (BeCaLoS) designed by SINTEF Petroleum Research to test, and highlight weaknesses of these measuring techniques. Both evaluation methods are successfully performed under four differen...

  12. Effect of Axial Force on the Performance of Micromachined Vibratory Rate Gyroscopes

    Directory of Open Access Journals (Sweden)

    Zhengyi Niu

    2010-12-01

    Full Text Available It is reported in the published literature that the resonant frequency of a silicon micromachined gyroscope decreases linearly with increasing temperature. However, when the axial force is considerable, the resonant frequency might increase as the temperature increases. The axial force is mainly induced by thermal stress due to the mismatch between the thermal expansion coefficients of the structure and substrate. In this paper, two types of micromachined suspended vibratory gyroscopes with slanted beams were proposed to evaluate the effect of the axial force. One type was suspended with a clamped-free (C-F beam and the other one was suspended with a clamped-clamped (C-C beam. Their drive modes are the bending of the slanted beam, and their sense modes are the torsion of the slanted beam. The relationships between the resonant frequencies of the two types were developed. The prototypes were packaged by vacuum under 0.1 mbar and an analytical solution for the axial force effect on the resonant frequency was obtained. The temperature dependent performances of the operated mode responses of the micromachined gyroscopes were measured. The experimental values of the temperature coefficients of resonant frequencies (TCF due to axial force were 101.5 ppm/°C for the drive mode and 21.6 ppm/°C for the sense mode. The axial force has a great influence on the modal frequency of the micromachined gyroscopes suspended with a C-C beam, especially for the flexure mode. The quality factors of the operated modes decreased with increasing temperature, and changed drastically when the micromachined gyroscopes worked at higher temperatures.

  13. A Micro-Machined Microphone Based on a Combination of Electret and Field-Effect Transistor

    OpenAIRE

    Kumjae Shin; Junsik Jeon; James Edward West; Wonkyu Moon

    2015-01-01

    Capacitive-type transduction is now widely used in MEMS microphones. However, its sensitivity decreases with reducing size, due to decreasing air gap capacitance. In the present study, we proposed and developed the Electret Gate of Field Effect Transistor (ElGoFET) transduction based on an electret and FET (field-effect-transistor) as a novel mechanism of MEMS microphone transduction. The ElGoFET transduction has the advantage that the sensitivity is dependent on the ratio of capacitance comp...

  14. A Active Micromachined Scalp Electrode Array for Eeg Signal Recording.

    Science.gov (United States)

    Alizadeh-Taheri, Babak

    This thesis describes the design, microfabrication, and testing of an active scalp EEG (electroencephalograph) electrode that has several distinct advantages over existing technologies. These advantages are: (1) no electrolyte used, (2) no skin preparation, (3) significantly reduced sensor size, and (4) compatibility with EEG monitoring systems. The active electrode array is an integrated system made of an array of capacitive sensors with local integrated circuitry housed in a package with batteries to power the circuitry. This level of integration was required to achieve the functional performance obtained by the electrode. The electrode consists of a silicon sensor substrate fabricated at UCD and a custom circuit substrate fabricated at Orbit Semiconductors, using a 2 μm analog CMOS technology. The circuitry was designed for low 1/f noise. One side of the sensor substrate holds four capacitive sensors with rm Si_3N _4 as the dielectric material. The opposite side holds aluminum pads for bonding to the circuit substrate. A via hole technology was developed to make electrical contact to both sides of the sensor substrate. The via holes are 200 μm square openings etched through the silicon by a reactive ion etching (RIE) process using an rm SF_6/O_2 gas mixture, oxidized, and then filled with sputtered aluminum for contacts through the substrate. The via holes have an aspect ratio of 2:1 (length of opening to depth of hole). Silicon RIE etch rates of up to 18 mu/hr were obtained under optimum conditions, using a 0.8 μm aluminum mask. The circuit and sensor substrates were bonded with silver adhesive, and wire bonding was used to make electrical contacts between the substrates. The two substrates were then integrated in a custom package for testing. The electrode was tested on an electrical test bench and on human subjects in four modalities of EEG activity, namely: (1) spontaneous EEG, (2) sensory event-related potentials, (3) brain stem potentials, and (4

  15. Porous Alumina Based Capacitive MEMS RH Sensor

    CERN Document Server

    Juhasz, L; Timar-Horvath, Veronika; Desmulliez, Marc; Dhariwal, Resh

    2008-01-01

    The aim of a joint research and development project at the BME and HWU is to produce a cheap, reliable, low-power and CMOS-MEMS process compatible capacitive type relative humidity (RH) sensor that can be incorporated into a state-of-the-art, wireless sensor network. In this paper we discuss the preparation of our new capacitive structure based on post-CMOS MEMS processes and the methods which were used to characterize the thin film porous alumina sensing layer. The average sensitivity is approx. 15 pF/RH% which is more than a magnitude higher than the values found in the literature. The sensor is equipped with integrated resistive heating, which can be used for maintenance to reduce drift, or for keeping the sensing layer at elevated temperature, as an alternative method for temperature-dependence cancellation.

  16. The Pyramidal Capacitated Vehicle Routing Problem

    DEFF Research Database (Denmark)

    Lysgaard, Jens

    This paper introduces the Pyramidal Capacitated Vehicle Routing Problem (PCVRP) as a restricted version of the Capacitated Vehicle Routing Problem (CVRP). In the PCVRP each route is required to be pyramidal in a sense generalized from the Pyramidal Traveling Salesman Problem (PTSP). A pyramidal...... of a pyramidal route is such that its traversal can be divided in two parts, where on the first part of the route, customers are visited in nondecreasing distance from the depot, and on the remaining part of the route, customers are visited in nonincreasing distance from the depot. Such a route shape is indeed...... found in many optimal solutions to CVRP instances. An optimal solution to the PCVRP may therefore be useful in itself as a heuristic solution to the CVRP. Further, an attempt can be made to find an even better CVRP solution by solving a TSP, possibly leading to a non-pyramidal route, for each...

  17. Automatic Power Factor Correction Using Capacitive Bank

    Directory of Open Access Journals (Sweden)

    Mr.Anant Kumar Tiwari,

    2014-02-01

    Full Text Available The power factor correction of electrical loads is a problem common to all industrial companies. Earlier the power factor correction was done by adjusting the capacitive bank manually [1]. The automated power factor corrector (APFC using capacitive load bank is helpful in providing the power factor correction. Proposed automated project involves measuring the power factor value from the load using microcontroller. The design of this auto-adjustable power factor correction is to ensure the entire power system always preserving unity power factor. The software and hardware required to implement the suggested automatic power factor correction scheme are explained and its operation is described. APFC thus helps us to decrease the time taken to correct the power factor which helps to increase the efficiency.

  18. Layer resolved capacitive probing of graphene bilayers

    Science.gov (United States)

    Zibrov, Alexander; Parmentier, François; Li, Jia; Wang, Lei; Hunt, Benjamin; Dean, Cory; Hone, James; Taniguchi, Takashi; Watanabe, Kenji; Young, Andrea

    Compared to single layer graphene, graphene bilayers have an additional ``which-layer'' degree of freedom that can be controlled by an external electric field in a dual-gated device geometry. We describe capacitance measurements capable of directly probing this degree of freedom. By performing top gate, bottom gate, and penetration field capacitance measurements, we directly extract layer polarization of both Bernal and twisted bilayers. We will present measurements of hBN encapsulated bilayers at both zero and high magnetic field, focusing on the physics of the highly degenerate zero-energy Landau level in the high magnetic field limit where spin, valley, and layer degeneracy are all lifted by electronic interactions.

  19. CMOS Integrated Capacitive DC-DC Converters

    CERN Document Server

    Van Breussegem, Tom

    2013-01-01

    This book provides a detailed analysis of all aspects of capacitive DC-DC converter design: topology selection, control loop design and noise mitigation. Readers will benefit from the authors’ systematic overview that starts from the ground up, in-depth circuit analysis and a thorough review of recently proposed techniques and design methodologies.  Not only design techniques are discussed, but also implementation in CMOS is shown, by pinpointing the technological opportunities of CMOS and demonstrating the implementation based on four state-of-the-art prototypes.  Provides a detailed analysis of all aspects of capacitive DC-DC converter design;  Analyzes the potential of this type of DC-DC converter and introduces a number of techniques to unleash their full potential; Combines system theory with practical implementation techniques; Includes unique analysis of CMOS technology for this application; Provides in-depth analysis of four fabricated prototypes.

  20. Performance relations in Capacitive Deionization systems

    OpenAIRE

    Limpt, van, C.

    2010-01-01

    Capacitive Deionization (CDI) is a relatively new deionization technology based on the temporary storage of ions on an electrically charged surface. By directing a flow between two oppositely charged surfaces, negatively charged ions will adsorb onto the positively charged surface, and positively charged ions will adsorb onto the negatively charged surface. To optimize CDI design for various applications, performance relations in CDI systems have to be understood. CDI performance is determine...

  1. THERMAL DRIFT CHARACTERISTICS OF CAPACITIVE PRESSURE SENSORS

    OpenAIRE

    ABDELAZIZ BEDDIAF; FOUAD KERROUR; SALAH KEMOUCHE

    2016-01-01

    The capacitive pressure sensors based on silicon are characterized by their very high sensitivities and their low power consumption. Nevertheless, their thermal behavior remains more or less unpredictable because they can indicate very high thermal coefficients. The study of the thermal behavior of these sensors is essential to define the parameters that cause the output characteristics drift. In this study, we modeled the thermal behavior of this sensors, using Finite Element Analysis (FE...

  2. Ultra-High-Frequency Capacitive Displacement Sensor

    Science.gov (United States)

    Vanzandt, Thomas R.; Kenny, Thomas W.; Kaiser, William J.

    1994-01-01

    Improved class of compact, high-resolution capacitive displacement sensors operates at excitation frequency of 915 MHz and measures about 7.5 by 4 by 2 centimeters. Contains commercially available 915-MHz oscillator and transmission-line resonator. Resonator contains stripline inductor in addition to variable capacitor. Ultrahigh excitation frequency offers advantages of resolution and frequency response. Not deleteriously affected by mechanical overdriving, or contact between electrodes.

  3. Capacitive Sensors And Targets Would Measure Alignments

    Science.gov (United States)

    Jenstrom, Del T.

    1994-01-01

    Multiple capacitive sensors and active targets used to measure distance between, and relative orientation of, two objects. Sensed target signals processed and used by control systems to align objects to be joined. Shapes, sizes, and layouts of sensors and targets optimized for specific application. Particular layout of targets and sensors enables determination of relative position and orientation of two objects in all six degrees of freedom.

  4. Development of a capacitive bioimpedance measurement system

    OpenAIRE

    Gómez Abad, Daniel

    2009-01-01

    Bioelectrical impedance spectroscopy (BIS) is a well-established and non-invasive method to determine and monitor body composition. Commercially available bioelectrical impedance systems use coated hydrogel-aluminium electrodes, where the hydrogel acts as an adhesive and as an electrolytic medium. The gel/adhesive is physiologically inert over short periods. However, when used over longer periods, hydrogel-aluminium electrodes present limitations, which capacitive electrodes ma...

  5. The fringe capacitance formula of microstructures

    International Nuclear Information System (INIS)

    This paper presents a fringe capacitance formula of microstructures. The formula is derived by curve fitting on ANSYS simulation results. Compared with the ANSYS and experimental results, the deviation is within ±2%. The application to determine the pull-in voltage of an electrostatic micro-beam is demonstrated, which agrees very well with the experimental data. The formula presented is very accurate, yields explicit physical meanings and is applicable to common dimension ranges for MEMS devices. (paper)

  6. Evaluation of EHD films by electrical capacitance

    Science.gov (United States)

    Jablonka, Karolina; Glovnea, Romeo; Bongaerts, Jeroen

    2012-09-01

    The elastohydrodynamic (EHD) lubrication regime occurs in many machine elements where a combination of hydrodynamic effect, elastic deformation of the loaded surfaces and increase in the viscosity of the lubricant with pressure ensures the formation of a very thin, but continuous film of lubricant separating the contacting surfaces. Electrical methods to determine this film's thickness have preceded optical methods, which are widely used today. Although they generally give more qualitative thickness information, electrical methods have the main advantage that they can be applied to metallic contacts in machines, which makes them useful tools in the study of elastohydrodynamically lubricated contacts. This paper is part of a larger study on the application of electrical capacitance for the evaluation of film formation in EHD contacts. The main focus is on the quantitative measurements of film thickness using electrical capacitance. A new approach allowing the lubricant film thickness to be extracted from the measured capacitance is developed using a chromium-coated glass disc and subsequently applied to a steel-on-steel contact. The results show good agreement with optical measurements and theoretical models over a range of film thickness.

  7. Multi-Channel Capacitive Sensor Arrays

    Directory of Open Access Journals (Sweden)

    Bingnan Wang

    2016-01-01

    Full Text Available In this paper, multi-channel capacitive sensor arrays based on microstrip band-stop filters are studied. The sensor arrays can be used to detect the proximity of objects at different positions and directions. Each capacitive sensing structure in the array is connected to an inductive element to form resonance at different frequencies. The resonances are designed to be isolated in the frequency spectrum, such that the change in one channel does not affect resonances at other channels. The inductive element associated with each capacitive sensor can be surface-mounted inductors, integrated microstrip inductors or metamaterial-inspired structures. We show that by using metamaterial split-ring structures coupled to a microstrip line, the quality factor of each resonance can be greatly improved compared to conventional surface-mounted or microstrip meander inductors. With such a microstrip-coupled split-ring design, more sensing elements can be integrated in the same frequency spectrum, and the sensitivity can be greatly improved.

  8. Carbon Materials for Chemical Capacitive Energy Storage

    Energy Technology Data Exchange (ETDEWEB)

    Zhai, Y.; Dou, Y.; Zhao, D.; Fulvio, P. F.; Mayes, R. T.; Dai, S.

    2011-09-26

    Carbon materials have attracted intense interests as electrode materials for electrochemical capacitors, because of their high surface area, electrical conductivity, chemical stability and low cost. Activated carbons produced by different activation processes from various precursors are the most widely used electrodes. Recently, with the rapid growth of nanotechnology, nanostructured electrode materials, such as carbon nanotubes and template-synthesized porous carbons have been developed. Their unique electrical properties and well controlled pore sizes and structures facilitate fast ion and electron transportation. In order to further improve the power and energy densities of the capacitors, carbon-based composites combining electrical double layer capacitors (EDLC)-capacitance and pseudo-capacitance have been explored. They show not only enhanced capacitance, but as well good cyclability. In this review, recent progresses on carbon-based electrode materials are summarized, including activated carbons, carbon nanotubes, and template-synthesized porous carbons, in particular mesoporous carbons. Their advantages and disadvantages as electrochemical capacitors are discussed. At the end of this review, the future trends of electrochemical capacitors with high energy and power are proposed.

  9. Carbon materials for chemical capacitive energy storage

    Energy Technology Data Exchange (ETDEWEB)

    Zhai, Yunpu; Zhao, Dongyuan [Department of Chemistry, Shanghai Key Laboratory of Molecular Catalysis and Innovative Materials, Key Laboratory of Molecular Engineering of Polymers of the Chinese, Ministry of Education, Laboratory of Advanced Materials, Fudan University, Shanghai (China); Dou, Yuqian [Department of Chemistry, Northeastern University, Shenyang (China); Fulvio, Pasquale F.; Mayes, Richard T.; Dai, Sheng [Chemical Sciences Division, Oak Ridge National Laboratory, Oak Ridge, TN (United States)

    2011-11-09

    Carbon materials have attracted intense interests as electrode materials for electrochemical capacitors, because of their high surface area, electrical conductivity, chemical stability and low cost. Activated carbons produced by different activation processes from various precursors are the most widely used electrodes. Recently, with the rapid growth of nanotechnology, nanostructured electrode materials, such as carbon nanotubes and template-synthesized porous carbons have been developed. Their unique electrical properties and well controlled pore sizes and structures facilitate fast ion and electron transportation. In order to further improve the power and energy densities of the capacitors, carbon-based composites combining electrical double layer capacitors (EDLC)-capacitance and pseudo-capacitance have been explored. They show not only enhanced capacitance, but as well good cyclability. In this review, recent progresses on carbon-based electrode materials are summarized, including activated carbons, carbon nanotubes, and template-synthesized porous carbons, in particular mesoporous carbons. Their advantages and disadvantages as electrochemical capacitors are discussed. At the end of this review, the future trends of electrochemical capacitors with high energy and power are proposed. (Copyright copyright 2011 WILEY-VCH Verlag GmbH and Co. KGaA, Weinheim)

  10. Multi-Channel Capacitive Sensor Arrays.

    Science.gov (United States)

    Wang, Bingnan; Long, Jiang; Teo, Koon Hoo

    2016-01-01

    In this paper, multi-channel capacitive sensor arrays based on microstrip band-stop filters are studied. The sensor arrays can be used to detect the proximity of objects at different positions and directions. Each capacitive sensing structure in the array is connected to an inductive element to form resonance at different frequencies. The resonances are designed to be isolated in the frequency spectrum, such that the change in one channel does not affect resonances at other channels. The inductive element associated with each capacitive sensor can be surface-mounted inductors, integrated microstrip inductors or metamaterial-inspired structures. We show that by using metamaterial split-ring structures coupled to a microstrip line, the quality factor of each resonance can be greatly improved compared to conventional surface-mounted or microstrip meander inductors. With such a microstrip-coupled split-ring design, more sensing elements can be integrated in the same frequency spectrum, and the sensitivity can be greatly improved. PMID:26821023

  11. Effect of astaxanthin on human sperm capacitation.

    Science.gov (United States)

    Donà, Gabriella; Kožuh, Ivana; Brunati, Anna Maria; Andrisani, Alessandra; Ambrosini, Guido; Bonanni, Guglielmo; Ragazzi, Eugenio; Armanini, Decio; Clari, Giulio; Bordin, Luciana

    2013-06-01

    In order to be able to fertilize oocytes, human sperm must undergo a series of morphological and structural alterations, known as capacitation. It has been shown that the production of endogenous sperm reactive oxygen species (ROS) plays a key role in causing cells to undergo a massive acrosome reaction (AR). Astaxanthin (Asta), a photo-protective red pigment belonging to the carotenoid family, is recognized as having anti-oxidant, anti-cancer, anti-diabetic and anti-inflammatory properties and is present in many dietary supplements. This study evaluates the effect of Asta in a capacitating buffer which induces low ROS production and low percentages of acrosome-reacted cells (ARC). Sperm cells were incubated in the presence or absence of increasing concentrations of Asta or diamide (Diam) and analyzed for their ROS production, Tyr-phosphorylation (Tyr-P) pattern and percentages of ARC and non-viable cells (NVC). Results show that Asta ameliorated both sperm head Tyr-P and ARC values without affecting the ROS generation curve, whereas Diam succeeded in enhancing the Tyr-P level but only of the flagellum without increasing ARC values. It is suggested that Asta can be inserted in the membrane and therefore create capacitation-like membrane alteration which allow Tyr-P of the head. Once this has occurred, AR can take place and involves a higher numbers of cells. PMID:23736766

  12. Effect of Astaxanthin on Human Sperm Capacitation

    Directory of Open Access Journals (Sweden)

    Luciana Bordin

    2013-06-01

    Full Text Available In order to be able to fertilize oocytes, human sperm must undergo a series of morphological and structural alterations, known as capacitation. It has been shown that the production of endogenous sperm reactive oxygen species (ROS plays a key role in causing cells to undergo a massive acrosome reaction (AR. Astaxanthin (Asta, a photo-protective red pigment belonging to the carotenoid family, is recognized as having anti-oxidant, anti-cancer, anti-diabetic and anti-inflammatory properties and is present in many dietary supplements. This study evaluates the effect of Asta in a capacitating buffer which induces low ROS production and low percentages of acrosome-reacted cells (ARC. Sperm cells were incubated in the presence or absence of increasing concentrations of Asta or diamide (Diam and analyzed for their ROS production, Tyr-phosphorylation (Tyr-P pattern and percentages of ARC and non-viable cells (NVC. Results show that Asta ameliorated both sperm head Tyr-P and ARC values without affecting the ROS generation curve, whereas Diam succeeded in enhancing the Tyr-P level but only of the flagellum without increasing ARC values. It is suggested that Asta can be inserted in the membrane and therefore create capacitation-like membrane alteration which allow Tyr-P of the head. Once this has occurred, AR can take place and involves a higher numbers of cells.

  13. Capacitive Structures for Gas and Biological Sensing

    KAUST Repository

    Sapsanis, Christos

    2015-04-01

    The semiconductor industry was benefited by the advances in technology in the last decades. This fact has an impact on the sensors field, where the simple transducer was evolved into smart miniaturized multi-functional microsystems. However, commercially available gas and biological sensors are mostly bulky, expensive, and power-hungry, which act as obstacles to mass use. The aim of this work is gas and biological sensing using capacitive structures. Capacitive sensors were selected due to its design simplicity, low fabrication cost, and no DC power consumption. In the first part, the dominant structure among interdigitated electrodes (IDEs), fractal curves (Peano and Hilbert) and Archimedean spiral was investigated from capacitance density perspective. The investigation consists of geometrical formula calculations, COMSOL Multiphysics simulations and cleanroom fabrication of the capacitors on a silicon substrate. Moreover, low-cost fabrication on flexible plastic PET substrate was conducted outside cleanroom with rapid prototyping using a maskless laser etching. The second part contains the humidity, Volatile Organic compounds (VOCs) and Ammonia sensing of polymers, Polyimide and Nafion, and metal-organic framework (MOF), Cu(bdc)2.xH2O using IDEs and tested in an automated gas setup for experiment control and data extraction. The last part includes the biological sensing of C - reactive protein (CRP) quantification, which is considered as a biomarker of being prone to cardiac diseases and Bovine serum albumin (BSA) protein quantification, which is used as a reference for quantifying unknown proteins.

  14. MEMS ultrasonic transducer for monitoring of steel structures

    Science.gov (United States)

    Jain, Akash; Greve, David W.; Oppenheim, Irving J.

    2002-06-01

    Ultrasonic methods can be used to monitor crack propagation, weld failure, or section loss at critical locations in steel structures. However, ultrasonic inspection requires a skilled technician, and most commonly the signal obtained at any inspection is not preserved for later use. A preferred technology would use a MEMS device permanently installed at a critical location, polled remotely, and capable of on-chip signal processing using a signal history. We review questions related to wave geometry, signal levels, flaw localization, and electromechanical design issues for microscale transducers, and then describe the design, characterization, and initial testing of a MEMS transducer to function as a detector array. The device is approximately 1-cm square and was fabricated by the MUMPS process. The chip has 23 sensor elements to function in a phased array geometry, each element containing 180 hexagonal polysilicon diaphragms with a typical leg length of 49 microns and an unloaded natural frequency near 3.5 MHz. We first report characterization studies including capacitance-voltage measurements and admittance measurements, and then report initial experiments using a conventional piezoelectric transducer for excitation, with successful detection of signals in an on-axis transmission experiment and successful source localization from phased array performance in an off-axis transmission experiment.

  15. Ultrasonic speech translator and communications system

    Science.gov (United States)

    Akerman, M. Alfred; Ayers, Curtis W.; Haynes, Howard D.

    1996-01-01

    A wireless communication system undetectable by radio frequency methods for converting audio signals, including human voice, to electronic signals in the ultrasonic frequency range, transmitting the ultrasonic signal by way of acoustical pressure waves across a carrier medium, including gases, liquids, or solids, and reconverting the ultrasonic acoustical pressure waves back to the original audio signal. The ultrasonic speech translator and communication system (20) includes an ultrasonic transmitting device (100) and an ultrasonic receiving device (200). The ultrasonic transmitting device (100) accepts as input (115) an audio signal such as human voice input from a microphone (114) or tape deck. The ultrasonic transmitting device (100) frequency modulates an ultrasonic carrier signal with the audio signal producing a frequency modulated ultrasonic carrier signal, which is transmitted via acoustical pressure waves across a carrier medium such as gases, liquids or solids. The ultrasonic receiving device (200) converts the frequency modulated ultrasonic acoustical pressure waves to a frequency modulated electronic signal, demodulates the audio signal from the ultrasonic carrier signal, and conditions the demodulated audio signal to reproduce the original audio signal at its output (250).

  16. Distributed Capacitive Sensor for Sample Mass Measurement

    Science.gov (United States)

    Toda, Risaku; McKinney, Colin; Jackson, Shannon P.; Mojarradi, Mohammad; Manohara, Harish; Trebi-Ollennu, Ashitey

    2011-01-01

    Previous robotic sample return missions lacked in situ sample verification/ quantity measurement instruments. Therefore, the outcome of the mission remained unclear until spacecraft return. In situ sample verification systems such as this Distributed Capacitive (DisC) sensor would enable an unmanned spacecraft system to re-attempt the sample acquisition procedures until the capture of desired sample quantity is positively confirmed, thereby maximizing the prospect for scientific reward. The DisC device contains a 10-cm-diameter pressure-sensitive elastic membrane placed at the bottom of a sample canister. The membrane deforms under the weight of accumulating planetary sample. The membrane is positioned in close proximity to an opposing rigid substrate with a narrow gap. The deformation of the membrane makes the gap narrower, resulting in increased capacitance between the two parallel plates (elastic membrane and rigid substrate). C-V conversion circuits on a nearby PCB (printed circuit board) provide capacitance readout via LVDS (low-voltage differential signaling) interface. The capacitance method was chosen over other potential approaches such as the piezoelectric method because of its inherent temperature stability advantage. A reference capacitor and temperature sensor are embedded in the system to compensate for temperature effects. The pressure-sensitive membranes are aluminum 6061, stainless steel (SUS) 403, and metal-coated polyimide plates. The thicknesses of these membranes range from 250 to 500 m. The rigid substrate is made with a 1- to 2-mm-thick wafer of one of the following materials depending on the application requirements glass, silicon, polyimide, PCB substrate. The glass substrate is fabricated by a microelectromechanical systems (MEMS) fabrication approach. Several concentric electrode patterns are printed on the substrate. The initial gap between the two plates, 100 m, is defined by a silicon spacer ring that is anodically bonded to the glass

  17. Evaluation of multiple-channel OFDM based airborne ultrasonic communications.

    Science.gov (United States)

    Jiang, Wentao; Wright, William M D

    2016-09-01

    Orthogonal frequency division multiplexing (OFDM) modulation has been extensively used in both wired and wireless communication systems. The use of OFDM technology allows very high spectral efficiency data transmission without using complex equalizers to correct the effect of a frequency-selective channel. This work investigated OFDM methods in an airborne ultrasonic communication system, using commercially available capacitive ultrasonic transducers operating at 50kHz to transmit information through the air. Conventional modulation schemes such as binary phase shift keying (BPSK) and quadrature amplitude modulation (QAM) were used to modulate sub-carrier signals, and the performances were evaluated in an indoor laboratory environment. Line-of-sight (LOS) transmission range up to 11m with no measurable errors was achieved using BPSK at a data rate of 45kb/s and a spectral efficiency of 1b/s/Hz. By implementing a higher order modulation scheme (16-QAM), the system data transfer rate was increased to 180kb/s with a spectral efficiency of 4b/s/Hz at attainable transmission distances up to 6m. Diffraction effects were incorporated into a model of the ultrasonic channel that also accounted for beam spread and attenuation in air. The simulations were a good match to the measured signals and non-LOS signals could be demodulated successfully. The effects of multipath interference were also studied in this work. By adding cyclic prefix (CP) to the OFDM symbols, the bit error rate (BER) performance was significantly improved in a multipath environment. PMID:27365316

  18. Calibration and validation of ultrasonic reflection methods for thin-film measurement in tribology

    International Nuclear Information System (INIS)

    Interfacial thin liquid films between solid bodies have been measured using ultrasonic reflective techniques in a range of tribological applications such as those present in hydrodynamic bearings, piston rings and mechanical seals (Dwyer-Joyce et al (2004) Tribol. Lett. 17 337–48, Dwyer-Joyce et al (2006) Proc. Instn Mech. Eng. A 220 619–28, Reddyhoff et al (2006) Tribol. Trans. 51 140–49, Harper et al (2005) Tribol. Interface Eng. Ser. 48 305–12). There are two main ultrasonic methods used, the spring model and film resonance techniques. For very thin films (<20 µm) a simple quasi-static spring model has been used to show that the proportion of the wave reflected by the liquid layer depends on the stiffness of the layer. This stiffness can be related to the layer thickness and its material properties. In the film resonance technique the incident ultrasonic wave is used to resonate the liquid layer. The frequency of resonance can then be related to the layer thickness. This paper collates four experiments where oil film thickness is measured by both ultrasonic reflection and an independent method. In the first three experiments the film thickness is measured ultrasonically and this measurement is compared to the thickness inferred from the geometry of the surfaces constraining the liquid film. In the final experiment the ultrasonic results are compared to measurements taken using capacitive and verified laser interferometer techniques. Excellent correlation was observed between the measurement methods in all of the experiments. In particular the film resonance technique showed repeatable and consistent results across a wide range of film thicknesses. The spring model showed a degree of agreement for films above a few microns but this relationship diverged as the film thickness approached the magnitude of the surface roughness. (paper)

  19. Improved capacitance sensor with variable operating frequency for scanning capacitance microscopy

    Energy Technology Data Exchange (ETDEWEB)

    Kwon, Joonhyung [PSIA Corporation, Induspia 5F, Sang-Daewon-Dong 517-13, Sungnam 462-120 (Korea, Republic of); Kim, Joonhui [PSIA Corporation, Induspia 5F, Sang-Daewon-Dong 517-13, Sungnam 462-120 (Korea, Republic of); Jeong, Jong-Hwa [PSIA Corporation, Induspia 5F, Sang-Daewon-Dong 517-13, Sungnam 462-120 (Korea, Republic of); Lee, Euy-Kyu [Department of Physics, Myongji University, Yongin, Kyunggido 449-728 (Korea, Republic of); Seok Kim, Yong [PSIA Corporation, Induspia 5F, Sang-Daewon-Dong 517-13, Sungnam 462-120 (Korea, Republic of); Kang, Chi Jung [Department of Physics, Myongji University, Yongin, Kyunggido 449-728 (Korea, Republic of); Park, Sang-il [PSIA Corporation, Induspia 5F, Sang-Daewon-Dong 517-13, Sungnam 462-120 (Korea, Republic of)]. E-mail: park@psia.co.kr

    2005-11-15

    Scanning capacitance microscopy (SCM) has been gaining attention for its capability to measure local electrical properties in doping profile, oxide thickness, trapped charges and charge dynamics. In many cases, stray capacitance produced by different samples and measurement conditions affects the resonance frequency of a capacitance sensor. The applications of conventional SCM are critically limited by the fixed operating frequency and lack of tunability in its SCM sensor. In order to widen SCM application to various samples, we have developed a novel SCM sensor with variable operating frequency. By performing variable frequency sweep over the band of 160 MHz, the SCM sensor is tuned to select the best and optimized resonance frequency and quality factor for each sample measurement. The fundamental advantage of the new variable frequency SCM sensor was demonstrated in the SCM imaging of silicon oxide nano-crystals. Typical sensitivity of the variable frequency SCM sensor was found to be 10{sup -19} F/V.

  20. Improved capacitance sensor with variable operating frequency for scanning capacitance microscopy

    International Nuclear Information System (INIS)

    Scanning capacitance microscopy (SCM) has been gaining attention for its capability to measure local electrical properties in doping profile, oxide thickness, trapped charges and charge dynamics. In many cases, stray capacitance produced by different samples and measurement conditions affects the resonance frequency of a capacitance sensor. The applications of conventional SCM are critically limited by the fixed operating frequency and lack of tunability in its SCM sensor. In order to widen SCM application to various samples, we have developed a novel SCM sensor with variable operating frequency. By performing variable frequency sweep over the band of 160 MHz, the SCM sensor is tuned to select the best and optimized resonance frequency and quality factor for each sample measurement. The fundamental advantage of the new variable frequency SCM sensor was demonstrated in the SCM imaging of silicon oxide nano-crystals. Typical sensitivity of the variable frequency SCM sensor was found to be 10-19 F/V

  1. Ultrasonic measurements and technologies

    CERN Document Server

    Kočiš, Štefan

    1996-01-01

    An impulse for writing this book has originated from the effort to sum­ marize and publicise the acquired results of a research team at the De­ partment of Automation of the Faculty of Electrical Engineering and In­ formatics, Slovak Technical University in Bratislava. The research team has been involved for a long time with control problems for machine production mechanisms and, in recent (approximately 15) years, its effort was aimed mostly at the control of electrical servosystems of robots. Within this scope, the members of the authors' staff solved the State Re­ search Task Ultrasonic sensing of the position of a robot hand, which was coordinated by the Institute of Technical Cybernetics of the Slovak Academy of Sciences in Bratislava. The problem was solved in a complex way, i.e. from a conceptual de­ sign of the measurement, through the measurement and evaluation sys­ tem, up to connection to the control system of a robot. Compensation of the atmospheric influence on the precision of measurement,...

  2. 21 CFR 872.4850 - Ultrasonic scaler.

    Science.gov (United States)

    2010-04-01

    ... DEVICES DENTAL DEVICES Surgical Devices § 872.4850 Ultrasonic scaler. (a) Identification. An ultrasonic scaler is a device intended for use during dental cleaning and periodontal (gum) therapy to...

  3. [Ultrasonics in endodontics: mechanism of action].

    Science.gov (United States)

    Pacheco Plaza, M C; Kessler Nieto, F; Orts Rodríguez, M T; Ruiz de Temiño Malo, P

    1989-01-01

    The present study, first of three dwelling with ultrasonics in endodontic therapy, is a review of the literature about mechanisms involved and appliance of some of the sonic and ultrasonic system. PMID:2700391

  4. A study on Pc- based ultrasonic testing system using intelligent ultrasonic flaw classification software

    International Nuclear Information System (INIS)

    For convenient application of ultrasonic pattern recognition approaches in practical field inspection of weldments, we have developed an intelligent ultrasonic flaw classification system by the novel combination of two ingredients; 1) a PC-based ultrasonic testing system, and 2) an intelligent ultrasonic flaw classification software with an invariant ultrasonic pattern recognition algorithm. Here, key aspects of this intelligent system are addressed including the Pc-based ultrasonic testing system, enhancement of the performance by use of newly proposed ultrasonic features, and feature selection.

  5. Geometric improvement of electrochemical discharge micro-drilling using an ultrasonic-vibrated electrolyte

    Science.gov (United States)

    Han, Min-Seop; Min, Byung-Kwon; Lee, Sang Jo

    2009-06-01

    Electrochemical discharge machining (ECDM) is a spark-based micromachining method especially suitable for the fabrication of various microstructures on nonconductive materials, such as glass and some engineering ceramics. However, since the spark discharge frequency is drastically reduced as the machining depth increases ECDM microhole drilling has confronted difficulty in achieving uniform geometry for machined holes. One of the primary reasons for this is the difficulty of sustaining an adequate electrolyte flow in the narrow gap between the tool and the workpiece, which results in a widened taper at the hole entrance, as well as a significant reduction of the machining depth. In this paper, ultrasonic electrolyte vibration was used to enhance the machining depth of the ECDM drilling process by assuring an adequate electrolyte flow, thus helping to maintain consistent spark generation. Moreover, the stability of the gas film formation, as well as the surface quality of the hole entrance, was improved with the aid of a side-insulated electrode and a pulse-power generator. The side-insulated electrode prevented stray electrolysis and concentrated the spark discharge at the tool tip, while the pulse voltage reduced thermal damage to the workpiece surface by introducing a periodic pulse-off time. Microholes were fabricated in order to investigate the effects of ultrasonic assistance on the overcut and machining depth of the holes. The experimental results demonstrated that the possibility of consistent spark generation and the machinability of microholes were simultaneously enhanced.

  6. Geometric improvement of electrochemical discharge micro-drilling using an ultrasonic-vibrated electrolyte

    International Nuclear Information System (INIS)

    Electrochemical discharge machining (ECDM) is a spark-based micromachining method especially suitable for the fabrication of various microstructures on nonconductive materials, such as glass and some engineering ceramics. However, since the spark discharge frequency is drastically reduced as the machining depth increases ECDM microhole drilling has confronted difficulty in achieving uniform geometry for machined holes. One of the primary reasons for this is the difficulty of sustaining an adequate electrolyte flow in the narrow gap between the tool and the workpiece, which results in a widened taper at the hole entrance, as well as a significant reduction of the machining depth. In this paper, ultrasonic electrolyte vibration was used to enhance the machining depth of the ECDM drilling process by assuring an adequate electrolyte flow, thus helping to maintain consistent spark generation. Moreover, the stability of the gas film formation, as well as the surface quality of the hole entrance, was improved with the aid of a side-insulated electrode and a pulse-power generator. The side-insulated electrode prevented stray electrolysis and concentrated the spark discharge at the tool tip, while the pulse voltage reduced thermal damage to the workpiece surface by introducing a periodic pulse-off time. Microholes were fabricated in order to investigate the effects of ultrasonic assistance on the overcut and machining depth of the holes. The experimental results demonstrated that the possibility of consistent spark generation and the machinability of microholes were simultaneously enhanced

  7. Study of ultrasonic thermometry based on ultrasonic time-of-flight measurement

    Directory of Open Access Journals (Sweden)

    Ruixi Jia

    2016-03-01

    Full Text Available Ultrasonic thermometry is a kind of acoustic pyrometry and it has been evolving as a new temperature measurement technology for various environment. However, the accurate measurement of the ultrasonic time-of-flight is the key for ultrasonic thermometry. In this paper, we study the ultrasonic thermometry technique based on ultrasonic time-of-flight measurement with a pair of ultrasonic transducers for transmitting and receiving signal. The ultrasonic transducers are installed in a single path which ultrasonic travels. In order to validate the performance of ultrasonic thermometry, we make a contrast about the absolute error between the measured temperature value and the practical one. With and without heater source, the experimental results indicate ultrasonic thermometry has high precision of temperature measurement.

  8. Study of ultrasonic thermometry based on ultrasonic time-of-flight measurement

    Science.gov (United States)

    Jia, Ruixi; Xiong, Qingyu; Wang, Lijie; Wang, Kai; Shen, Xuehua; Liang, Shan; Shi, Xin

    2016-03-01

    Ultrasonic thermometry is a kind of acoustic pyrometry and it has been evolving as a new temperature measurement technology for various environment. However, the accurate measurement of the ultrasonic time-of-flight is the key for ultrasonic thermometry. In this paper, we study the ultrasonic thermometry technique based on ultrasonic time-of-flight measurement with a pair of ultrasonic transducers for transmitting and receiving signal. The ultrasonic transducers are installed in a single path which ultrasonic travels. In order to validate the performance of ultrasonic thermometry, we make a contrast about the absolute error between the measured temperature value and the practical one. With and without heater source, the experimental results indicate ultrasonic thermometry has high precision of temperature measurement.

  9. Ultrasonic stir welding process and apparatus

    Science.gov (United States)

    Ding, R. Jeffrey (Inventor)

    2009-01-01

    An ultrasonic stir welding device provides a method and apparatus for elevating the temperature of a work piece utilizing at least one ultrasonic heater. Instead of relying on a rotating shoulder to provide heat to a workpiece an ultrasonic heater is utilized to provide ultrasonic energy to the workpiece. A rotating pin driven by a motor assembly performs the weld on the workpiece. A handheld version can be constructed as well as a fixedly mounted embodiment.

  10. High temperature pressure coupled ultrasonic waveguide

    International Nuclear Information System (INIS)

    A pressure coupled ultrasonic waveguide is provided to which one end may be attached a transducer and at the other end a high temperature material for continuous ultrasonic testing of the material. The ultrasonic signal is coupled from the waveguide into the material through a thin, dry copper foil

  11. Numerical analysis of capacitive pressure micro-sensors

    Institute of Scientific and Technical Information of China (English)

    WANG; Xiaomin; LI; Mingxuan; WANG; Chenghao

    2005-01-01

    Pseudo-spectral method is used to numerically model the diaphragm deflection of capacitive pressure micro-sensor under uniform load. The relationship between the capacitance of the micro-sensor and the load is then analyzed after the description of the computational principle. For normal mode micro-sensor, the tensile force on the diaphragm can be ignored and thereby the capacitance increases linearly with the load increase only when the load is so small that the resultant deflection is less than the diaphragm thickness. The linear relationship between the capacitance and the load turns to be nonlinear thereafter and the capacitance rises dramatically with the constant increase of the load. For touch mode micro-sensor, an algorithm to determine the touch radius of the diaphragm and substrate is presented and the curve of capacitance versus load is shown on the numerical results laying a theoretical foundation for micro-sensor design.

  12. Optimization of design parameters for bulk micromachined silicon membranes for piezoresistive pressure sensing application

    Science.gov (United States)

    Belwanshi, Vinod; Topkar, Anita

    2016-05-01

    Finite element analysis study has been carried out to optimize the design parameters for bulk micro-machined silicon membranes for piezoresistive pressure sensing applications. The design is targeted for measurement of pressure up to 200 bar for nuclear reactor applications. The mechanical behavior of bulk micro-machined silicon membranes in terms of deflection and stress generation has been simulated. Based on the simulation results, optimization of the membrane design parameters in terms of length, width and thickness has been carried out. Subsequent to optimization of membrane geometrical parameters, the dimensions and location of the high stress concentration region for implantation of piezoresistors have been obtained for sensing of pressure using piezoresistive sensing technique.

  13. Modelling of micromachining of human tooth enamel by erbium laser radiation

    Energy Technology Data Exchange (ETDEWEB)

    Belikov, A V; Skrypnik, A V; Shatilova, K V [St. Petersburg National Research University of Information Technologies, Mechanics and Optics, St. Petersburg (Russian Federation)

    2014-08-31

    We consider a 3D cellular model of human tooth enamel and a photomechanical cellular model of enamel ablation by erbium laser radiation, taking into account the structural peculiarities of enamel, energy distribution in the laser beam cross section and attenuation of laser energy in biological tissue. The surface area of the texture in enamel is calculated after its micromachining by erbium laser radiation. The influence of the surface area on the bond strength of enamel with dental filling materials is discussed. A good correlation between the computer simulation of the total work of adhesion and experimentally measured bond strength between the dental filling material and the tooth enamel after its micromachining by means of YAG : Er laser radiation is attained. (laser biophotonics)

  14. Integration of active materials with silicon micromachining: applications to optical MEMS

    Science.gov (United States)

    Gouy, Jean-Philippe; Arakawa, Yasuhiko; Fujita, Hiroyuki

    2001-11-01

    Most of the MOEMS including optical switches and micro optical benches are developed on silicon. As for the MEMS, the main reason is that silicon has consistently been the material of choice for the microelectronics industry, due to a mature processing technology which offers the possibility to integrate MEMS devices with Integrated Circuits in a low cost batch fabrication process. However, since the beginning of Optoelectronic, silicon has been suffering from its poor efficiency to emit light because of its indirect band gap. Optical active devices can be integrated on silicon by combining specific active materials in order to keep the main advantage of silicon micromachining for MOEMS applications. This paper illustrates this purpose through one project developed in the frame of the LIMMS, joint laboratory between France and Japan. This project deals with optical active devices for which silicon micromachining technology has been employed to fabricate an organic semiconductors based light emitted diode on silicon substrate.

  15. Superhydrophobic Surface by Replication of Laser Micromachined Pattern in Epoxy/Alumina Nanoparticle Composite

    Directory of Open Access Journals (Sweden)

    Maciej Psarski

    2014-01-01

    Full Text Available Superhydrophobic surfaces were obtained by superposition of microstructure—defined by replication of laser micromachined masters, with nanostructure—created by durable epoxy/γ-Al2O3 nanoparticle composite, used for replication. Hierarchical surface topography thus obtained consisted of hexagonally spaced microcavities and nanoparticle agglomerates, exposed on the replica surface by radio frequency (RF air plasma etching. Surface topography was further enhanced by rims around the microcavity edges, resulting from nanosecond laser micromachining defects in aluminum masters. Subsequent wet chemical hydrophobization with 1H,1H,2H,2H-perfluorotetradecyltriethoxysilane (PFTDTES provided superhydrophobic behavior in replicas with a microcavity spacing of 30 μm, as indicated by a water contact angle of 160° and a sliding angle of 8°. The preparation method is relatively simple, inexpensive, and potentially scalable.

  16. Fabrication of three-dimensional microdisk resonators in calcium fluoride by femtosecond laser micromachining

    CERN Document Server

    Lin, Jintian; Tang, Jialei; Wang, Nengwen; Song, Jiangxin; He, Fei; Fang, Wei; Cheng, Ya

    2014-01-01

    We report on fabrication of on-chip calcium fluoride (CaF2) microdisk resonators using water-assisted femtosecond laser micromachining. Focused ion beam (FIB) milling is used to create ultra-smooth sidewalls. The quality (Q)-factors of the fabricated microresonators are measured to be 4.2x10^4 at wavelengths near 1550 nm. The Q factor is mainly limited by the scattering from the bottom surface of the disk whose roughness remains high due to the femtosecond laser micromachining process. This technique facilitates formation of on-chip microresonators on various kinds of bulk crystalline materials, which can benefit a wide range of applications such as nonlinear optics, quantum optics, and chip-level integration of photonic devices.

  17. Ultrasonic ash/pyrite liberation

    Energy Technology Data Exchange (ETDEWEB)

    Yungman, B.A.; Buban, K.S.; Stotts, W.F.

    1990-06-01

    The objective of this project was to develop a coal preparation concept which employed ultrasonics to precondition coal prior to conventional or advanced physical beneficiation processes such that ash and pyrite separation were enhanced with improved combustible recovery. Research activities involved a series of experiments that subjected three different test coals, Illinois No. 6, Pittsburgh No. 8, and Upper Freeport, ground to three different size fractions (28 mesh [times] 0, 200 mesh [times] 0, and 325 mesh [times] 0), to a fixed (20 kHz) frequency ultrasonic signal prior to processing by conventional and microbubble flotation. The samples were also processed by conventional and microbubble flotation without ultrasonic pretreatment to establish baseline conditions. Product ash, sulfur and combustible recovery data were determined for both beneficiation processes.

  18. Lamb Wave Helical Ultrasonic Tomography

    Science.gov (United States)

    Leonard, K. R.; Hinders, M. K.

    2004-02-01

    Ultrasonic guided waves have been used for a wide variety of ultrasonic inspection techniques. We describe here a new variation called helical ultrasound tomography (HUT). This new technique, among other things, has direct application to advanced pipe inspection. HUT uses guided ultrasonic waves along with an adaptation of the tomographic reconstruction algorithms developed by seismologists for what they call "cross borehole" tomography. In HUT, the Lamb-like guided waves travel in various helical crisscross paths between two parallel circumferential transducer arrays instead of the planar crisscross seismic paths between two boreholes. Although the measurement itself is fairly complicated, the output of the tomographic reconstruction is a readily interpretable map of a quantity of interest such as pipe wall thickness. We demonstrate the feasibility of the HUT technique via laboratory scans on steel pipe segments into which controlled thinnings have been introduced.

  19. Accurate sizing of supercapacitors storage system considering its capacitance variation.

    OpenAIRE

    Trieste, Sony; Bourguet, Salvy; Olivier, Jean-Christophe; Loron, Luc; Le Claire, Jean-Claude

    2011-01-01

    This paper highlights the energy errors made for the design of supercapacitors used as a main energy source. First of all, the paper presents the two definitions of capacitance of a capacitance-voltage dependent material. The number of supercapacitors is important for the application purchasing cost. That is why the paper introduces an analytical model and an electrical model along with an identification method for the capacitance variation. This variation is presented and compared to the man...

  20. Nonlinear dynamics of capacitive charging and desalination by porous electrodes

    OpenAIRE

    Biesheuvel, P. M.; Bazant, M.Z.

    2010-01-01

    The rapid and efficient exchange of ions between porous electrodes and aqueous solutions is important in many applications, such as electrical energy storage by super-capacitors, water desalination and purification by capacitive deionization (or desalination), and capacitive extraction of renewable energy from a salinity difference. Here, we present a unified mean-field theory for capacitive charging and desalination by ideally polarizable porous electrodes (without Faradaic reactions or spec...

  1. Probing Quantum Capacitance in a 3D Topological Insulator

    OpenAIRE

    Kozlov, D. A.; Bauer, Dominik; Ziegler, Johannes; Fischer, Ralf, 1965-; Savchenko, M. L.; Kvon, Z.D.; Mikhailov, N. N.; Dvoretsky, S. A.; Weiss, Dieter

    2016-01-01

    We measure the quantum capacitance and probe thus directly the electronic density of states of the high mobility, Dirac type of two-dimensional electron system, which forms on the surface of strained HgTe. Here we show that observed magneto-capacitance oscillations probe, in contrast to magnetotransport, primarily the top surface. Capacitance measurements constitute thus a powerful tool to probe only one topological surface and to reconstruct its Landau level spectrum for different positions ...

  2. DEVELOPMENT OF ADAPTED CAPACITANCE MANOMETER FOR  THERMOSPHERIC APPLICATIONS

    OpenAIRE

    Orr, Cameron Scott

    2016-01-01

    An adapted capacitance manometer is a sensor composed of one fixed plate and one movable plate that is able to make accurate pressure measurements in a low pressure environment. Using detection circuitry, a change in capacitance between the two plates can be measured and correlated to a differential pressure. First, a high sensitivity manometer is produced that exhibits a measurable change in capacitance when experiencing a pressure differential in a low pressure space environment. Second,...

  3. Static and Motional Feedthrough Capacitance of Flexural Microresonator

    OpenAIRE

    Wen-Teng Chang

    2011-01-01

    The present paper evaluates the static and motional feedthrough capacitance of a silicon carbide-based flexural-mode microelectromechanical system resonator. The static feedthrough capacitance was measured by a network analyzer under atmospheric pressure. The motional feedthrough was obtained by introducing various values into the modeling circuit in order to fit the Bode plots measured under reduced pressure. The static feedthrough capacitance was 0.02 pF, whereas the motional feedthrough ca...

  4. Capacitive position measurement for high-precision space inertial sensor

    Institute of Scientific and Technical Information of China (English)

    Yan-zheng BAI; Ze-bing ZHOU; Hai-bo TU; Shu-chao WU; Lin CAI; LI LIU; Jun LUO

    2009-01-01

    Low noise position measurement is fundamental for space inertial sensors, and at present the capacitive position sensor is widely employed for space inertial sensors. The design for the possible suppression of the front-end electric noises for a capacitive sensor is presented. A prototype capacitive sensor with 2x 10-6pF/Hzi/2 at frequency above 0.04 Hz is achieved and further improvements are discussed.

  5. Carrier Statistics and Quantum Capacitance Models of Graphene Nanoscroll

    Directory of Open Access Journals (Sweden)

    M. Khaledian

    2014-01-01

    schematic perfect scroll-like Archimedes spiral. The DOS model was derived at first, while it was later applied to compute the carrier concentration and quantum capacitance model. Furthermore, the carrier concentration and quantum capacitance were modeled for both degenerate and nondegenerate regimes, along with examining the effect of structural parameters and chirality number on the density of state and carrier concentration. Latterly, the temperature effect on the quantum capacitance was studied too.

  6. CMOS MEMS capacitive absolute pressure sensor

    International Nuclear Information System (INIS)

    This paper presents the design, fabrication and characterization of a capacitive pressure sensor using a commercial 0.18 µm CMOS (complementary metal–oxide–semiconductor) process and postprocess. The pressure sensor is capacitive and the structure is formed by an Al top electrode enclosed in a suspended SiO2 membrane, which acts as a movable electrode against a bottom or stationary Al electrode fixed on the SiO2 substrate. Both the movable and fixed electrodes form a variable parallel plate capacitor, whose capacitance varies with the applied pressure on the surface. In order to release the membranes the CMOS layers need to be applied postprocess and this mainly consists of four steps: (1) deposition and patterning of PECVD (plasma-enhanced chemical vapor deposition) oxide to protect CMOS pads and to open the pressure sensor top surface, (2) etching of the sacrificial layer to release the suspended membrane, (3) deposition of PECVD oxide to seal the etching holes and creating vacuum inside the gap, and finally (4) etching of the passivation oxide to open the pads and allow electrical connections. This sensor design and fabrication is suitable to obey the design rules of a CMOS foundry and since it only uses low-temperature processes, it allows monolithic integration with other types of CMOS compatible sensors and IC (integrated circuit) interface on a single chip. Experimental results showed that the pressure sensor has a highly linear sensitivity of 0.14 fF kPa−1 in the pressure range of 0–300 kPa. (paper)

  7. CMOS MEMS capacitive absolute pressure sensor

    Science.gov (United States)

    Narducci, M.; Yu-Chia, L.; Fang, W.; Tsai, J.

    2013-05-01

    This paper presents the design, fabrication and characterization of a capacitive pressure sensor using a commercial 0.18 µm CMOS (complementary metal-oxide-semiconductor) process and postprocess. The pressure sensor is capacitive and the structure is formed by an Al top electrode enclosed in a suspended SiO2 membrane, which acts as a movable electrode against a bottom or stationary Al electrode fixed on the SiO2 substrate. Both the movable and fixed electrodes form a variable parallel plate capacitor, whose capacitance varies with the applied pressure on the surface. In order to release the membranes the CMOS layers need to be applied postprocess and this mainly consists of four steps: (1) deposition and patterning of PECVD (plasma-enhanced chemical vapor deposition) oxide to protect CMOS pads and to open the pressure sensor top surface, (2) etching of the sacrificial layer to release the suspended membrane, (3) deposition of PECVD oxide to seal the etching holes and creating vacuum inside the gap, and finally (4) etching of the passivation oxide to open the pads and allow electrical connections. This sensor design and fabrication is suitable to obey the design rules of a CMOS foundry and since it only uses low-temperature processes, it allows monolithic integration with other types of CMOS compatible sensors and IC (integrated circuit) interface on a single chip. Experimental results showed that the pressure sensor has a highly linear sensitivity of 0.14 fF kPa-1 in the pressure range of 0-300 kPa.

  8. Advances in Femtosecond Micromachining and Inscription of Micro and Nano Photonic Devices

    OpenAIRE

    Smith, Graham N; Kalli, Kyriacos; Sugden, Kate

    2010-01-01

    The use of focussed femtosecond laser pulses to fundamentally change materials through the interaction of the pulse and material offers new opportunities in device design. This is especially true for fabrication of intricate microstructures within the bulk volume of optically transparent glassy or polymeric materials. But it also can give significant advantages for the micromachining of surface structures in opaque materials in terms of feature size and aspect ratio. Although femtosecond lase...

  9. Self-Locking Avoidance and Stiffness Compensation of a Three-Axis Micromachined Electrostatically Suspended Accelerometer

    OpenAIRE

    Yonggang Yin; Boqian Sun; Fengtian Han

    2016-01-01

    A micromachined electrostatically-suspended accelerometer (MESA) is a kind of three-axis inertial sensor based on fully-contactless electrostatic suspension of the proof mass (PM). It has the potential to offer broad bandwidth, high sensitivity, wide dynamic range and, thus, would be perfectly suited for land seismic acquisition. Previous experiments showed that it is hard to lift up the PM successfully during initial levitation as the mass needs to be levitated simultaneously in all six degr...

  10. A resonant miniature electric field sensor using bulk-micromachining process

    Institute of Scientific and Technical Information of China (English)

    DENG Kai; XIA Shanhong; GONG Chao; PENG Chunrong; TAO Hu; BAI Qiang; CHEN Shaofeng

    2005-01-01

    A novel design of a resonant miniature electric field sensor based on microfabrication technology is proposed. The operating principles and specifications, the design structure, and the silicon-based bulk-micromachining fabrication process are presented. The finite element simulation shows that our design can obtain good results in device parameters setting, and its simplicity and low-cost features make it an attractive product for future applications.

  11. Micro-machining workstation for a diode pumped Nd:YAG high-brightness laser system

    Science.gov (United States)

    Kleijhorst, R. A.; Offerhaus, H. L.; Bant, P.

    1998-05-01

    A Nd:YAG micro-machining workstation that allows cutting on a scale of a few microns has been developed and operated. The system incorporates a telescope viewing system that allows control during the work and a software interface to translate AutoCad files. Some examples of the performance are given. With this setup we demonstrate the possibility of machining within a few microns with a Nd:YAG laser.

  12. Simulation of Thin-Film Damping and Thermal Mechanical Noise Spectra for Advanced Micromachined Microphone Structures

    OpenAIRE

    Hall, Neal A.; Okandan, Murat; Littrell, Robert; Bicen, Baris; Degertekin, F. Levent

    2008-01-01

    In many micromachined sensors the thin (2–10 μm thick) air film between a compliant diaphragm and backplate electrode plays a dominant role in shaping both the dynamic and thermal noise characteristics of the device. Silicon microphone structures used in grating-based optical-interference microphones have recently been introduced that employ backplates with minimal area to achieve low damping and low thermal noise levels. Finite-element based modeling procedures based on 2-D discretization of...

  13. Multifrequency Excitation Method for Rapid and Accurate Dynamic Test of Micromachined Gyroscope Chips

    OpenAIRE

    Yan Deng; Bin Zhou; Chao Xing; Rong Zhang

    2014-01-01

    A novel multifrequency excitation (MFE) method is proposed to realize rapid and accurate dynamic testing of micromachined gyroscope chips. Compared with the traditional sweep-frequency excitation (SFE) method, the computational time for testing one chip under four modes at a 1-Hz frequency resolution and 600-Hz bandwidth was dramatically reduced from 10 min to 6 s. A multifrequency signal with an equal amplitude and initial linear-phase-difference distribution was generated to ensure test rep...

  14. Oblique Powder Blasting for Three-dimensional Micromachining of Brittle Materials

    OpenAIRE

    Belloy, E.; Sayah, A.; Gijs, M. A. M.

    2001-01-01

    We present oblique powder blasting as a three-dimensional micromachining technology for brittle materials. Powder blasting is a microfabrication process, based on the use of a pressurised air beam containing eroding Al2O3 particles. By varying the angle of incidence of the incoming particles to a substrate, covered by a mask, one can exploit the oblique slopes of micropatterned holes and mask underetching phenomena to generate new options for three-dimensional microstructuring. We have identi...

  15. A Laser Fabrication of Magnetic Micromachines by Using Optimized Photosensitive Ferrofluids

    Directory of Open Access Journals (Sweden)

    Ye Tian

    2016-01-01

    Full Text Available We report here a laser fabrication of magnetic micromachines by using optimized photosensitive ferrofluids. Fe3O4 nanoparticles were prepared by thermal decomposition and subsequent ligand exchange. And then, they were dispersed into photoresist. As a representative illustration, a magnetic microturbine with high surface flatness was fabricated, and its rotation speed could reach as high as 400 rpm under revolving magnetic field.

  16. Micro-machining workstation for a diode pumped Nd:YAG high-brightness laser system

    OpenAIRE

    Kleijhorst, R.A.; Offerhaus, H. L.; Bant, P.

    1998-01-01

    A Nd:YAG micro-machining workstation that allows cutting on a scale of a few microns has been developed and operated. The system incorporates a telescope viewing system that allows control during the work and a software interface to translate AutoCad files. Some examples of the performance are given. With this setup we demonstrate the possibility of machining within a few microns with a Nd:YAG laser.

  17. Capacitive tool standoff sensor for dismantlement tasks

    Energy Technology Data Exchange (ETDEWEB)

    Schmitt, D.J.; Weber, T.M. [Sandia National Labs., Albuquerque, NM (United States); Liu, J.C. [Univ. of Illinois, Urbana, IL (United States)

    1996-12-31

    A capacitive sensing technology has been applied to develop a Standoff Sensor System for control of robotically deployed tools utilized in Decontamination and Dismantlement (D and D) activities. The system combines four individual sensor elements to provide non-contact, multiple degree-of-freedom control of tools at distances up to five inches from a surface. The Standoff Sensor has been successfully integrated to a metal cutting router and a pyrometer, and utilized for real-time control of each of these tools. Experiments demonstrate that the system can locate stationary surfaces with a repeatability of 0.034 millimeters.

  18. Capacitive tool standoff sensor for dismantlement tasks

    International Nuclear Information System (INIS)

    A capacitive sensing technology has been applied to develop a Standoff Sensor System for control of robotically deployed tools utilized in Decontamination and Dismantlement (D and D) activities. The system combines four individual sensor elements to provide non-contact, multiple degree-of-freedom control of tools at distances up to five inches from a surface. The Standoff Sensor has been successfully integrated to a metal cutting router and a pyrometer, and utilized for real-time control of each of these tools. Experiments demonstrate that the system can locate stationary surfaces with a repeatability of 0.034 millimeters

  19. 3-D capacitance density imaging system

    Science.gov (United States)

    Fasching, G.E.

    1988-03-18

    A three-dimensional capacitance density imaging of a gasified bed or the like in a containment vessel is achieved using a plurality of electrodes provided circumferentially about the bed in levels and along the bed in channels. The electrodes are individually and selectively excited electrically at each level to produce a plurality of current flux field patterns generated in the bed at each level. The current flux field patterns are suitably sensed and a density pattern of the bed at each level determined. By combining the determined density patterns at each level, a three-dimensional density image of the bed is achieved. 7 figs.

  20. Very high temperature ultrasonic thermometer

    International Nuclear Information System (INIS)

    An ultrasonic thermometer comprises an electric pulse transducer head, a pulse transmission line, a notched sensor wire attached to and extending along the axis of said transmission line and a sheath enclosing the transmission line and the sensor wire, a portion of the interior face of the sheath being covered by a stuffing material along at least the length of the notched part of the sensor wire, such that contact between the sensor wire and the stuffing material does not substantially give rise to reflection of an ultrasonic pulse at the point of contact. (author)

  1. Flow measurement by ultrasonic method

    International Nuclear Information System (INIS)

    An Ultrasonic Flow Meter (USFM) wasdeveloped to measure flow velocity of high temperature fluid in a pipe. To protect ultrasonic transducers from high temperature, guide rods were used. From the study on mechanical structure and acoustic property, the guide rod and the electronic circuit were improved to have capabilities of temperature compensation, quick response, high accuracy and not to be easily disturbed by bubbles contained in the fluid flow. Using a water flow loop, the test results proved the accuracy of +-1.0 percent and response time of 10 m sec

  2. Ultrasonic large aperture imaging system

    International Nuclear Information System (INIS)

    A new ultrasonic large aperture imaging technique is described. This device combines a focussed transducer as a transmitter, producing a small ultrasonic beam, with N transducers as receivers. We show that is possible to considerably reduce the number of receivers if, on the one hand, we limit the reconstitution process to the emitter beam area and, on the other hand, we ensure that the artefacts, caused by the spatial sampling of the reception, are outside this area. Under these conditions, the result is a high resolution image which does not require large reconstitution processing times. Theoretical and experimental results are given

  3. On line ultrasonic integrated backscatter

    International Nuclear Information System (INIS)

    A new equipment for on-line evaluation of index based on two-dimensional integrated backscatter from ultrasonic images is described. The new equipment is fully integrated into a B-mode ultrasonic apparatus which provides a simultaneous display of conventional information together with parameters of tissue characterization. The system has been tested with a backscattering model of microbubbles in polysaccharide solution, characterized by a physiological exponential time decay. An exponential fitting to the experimental data was performed which yielded r=0.95

  4. Human body capacitance: static or dynamic concept? [ESD

    DEFF Research Database (Denmark)

    Jonassen, Niels M

    1998-01-01

    A standing human body insulated from ground by footwear and/or floor covering is in principle an insulated conductor and has, as such, a capacitance, i.e. the ability to store a charge and possibly discharge the stored energy in a spark discharge. In the human body, the human body capacitance (HBC......) is traditionally chosen as 100 pF. However, a simple geometric model seems to suggest considerably higher values. A series of experiments, where the capacitance of standing persons were determined for various combinations of footwear and floor coverings, gave values in the order of 100-150 pF when the capacitance...

  5. Calibration of capacitive hydrostatic leveling sensors of NSRL

    International Nuclear Information System (INIS)

    The principle of capacitive hydrostatic leveling sensors was presented. Simulations of sensors with two kinds of materials (metal and distilled water) as target electrode in the situations of calibration and work were carried out by Ansoft Maxwell software. Different values of capacitances in different situations were compared and analyzed. Then some experiments were done with independently developed prototype of capacitive hydrostatic leveling sensors to verify the above simulations. In the situations of calibration and work, the same property (conductivity and dielectric constant) material as target electrode should be chosen for capacitive hydrostatic leveling sensors. Otherwise, there is an error of sensors after calibration, and the main factor is conductivity. (authors)

  6. Variable-capacitance tachometer eliminates troublesome magnetic fields

    Science.gov (United States)

    1966-01-01

    Dual variable-capacitance tachometer measures angular speed and sense of rotation without magnetic components. Thus it eliminates magnetic flux interference with associated instrumentation in an electromechanical system.

  7. Quantum capacitance of graphene in contact with metal

    International Nuclear Information System (INIS)

    We report a versatile computation method to quantitatively determine the quantum capacitance of graphene when it is in contact with metal. Our results bridge the longstanding gap between the theoretically predicted and experimentally measured quantum capacitance of graphene. Contrary to popular assumptions, the presence of charged impurities or structural distortions of graphene are not the only sources of the asymmetric capacitance with respect to the polarity of the bias potential and the higher-than-expected capacitance at the Dirac point. They also originate from the field-induced electronic interactions between graphene and metal. We also provide an improved model representation of a metal–graphene junction

  8. Micromachining of Ti-3Al-2.5V tubes by nanosecond Nd:YAG laser

    Science.gov (United States)

    Lin, Yaomin; Gupta, Mool C.

    2013-03-01

    Laser micromachining is one of many laser material processing technologies employed in scientific research and engineering applications. It involves the deposition of photon energy and the material interaction. The intense photothermal energy is transported into the target material causing melting and evaporation. The material is removed layer by layer by melting and flowing away or by direct vaporization / ablation. It is due to the focused small spot size that the laser micromachining can remove material in small quantity at a time, thus precise control of geometrical dimension is possible. In this work, a nanosecond pulsed Nd:Yttrium-Aluminum-Garnet (Nd:YAG) laser was employed to generate relatively long notch of different dimensions (25.4 mm-length × 0.1 mm-width × 0.051/0.102/0.152 mmdepth) on Ti-3Al-2.5V seamless tubes for fatigue life study. Cyclic hydraulic impulse pressure test was conducted to find out the fatigue limits of the titanium tube containing the laser micromachined notch. The results of fatigue lives, crack profile and pattern of crack propagation are presented and discussed in this paper. Scanning electron microscopy was employed to characterize the fatigue crack profile and the laser micronotch. The capability of generating sharper notch root and consistent pre-crack on the surface of materials makes nanosecond pulsed Nd:YAG laser a great choice in preparing for fatigue test samples for crack growth life study.

  9. Abrasive jet micro-machining of planar areas and transitional slopes

    International Nuclear Information System (INIS)

    Analytical and computer models are presented to predict the evolution of planar areas and transitional slopes micromachined in glass using abrasive jet micro-machining. The energy distributions across a rectangular and a round nozzle were found to be non-uniform and therefore unsuitable to machine flat surfaces in a single pass. Consequently, a simple model was developed to guide the computer-controlled machining of an approximately flat surface, by the use of multiple passes arranged in such a manner that the summation of their energy distributions gave a uniform energy flux to the surface. Planar areas were machined in glass, and there was good agreement between the model predictions and experimentally measured surface profiles. Masked planar areas were also machined, and it was found that particle scattering by the mask edge (Ghobeity, Krajac, Burzynski, Papini and Spelt 2008 Wear 264 185–98) caused the sidewalls of the planar area to be very shallow, on the order of only a few degrees. A novel method is presented to increase the slope at the edges of such masked planar areas. Although the methods are demonstrated through the micro-machining of flat, planar areas, they are equally applicable to the production of inclined planar areas and arbitrarily curved surfaces

  10. Enhancing structural integrity of adhesive bonds through pulsed laser surface micro-machining

    KAUST Repository

    Diaz, Edwin Hernandez

    2015-06-01

    Enhancing the effective peel resistance of plastically deforming adhesive joints through laser-based surface micro-machining Edwin Hernandez Diaz Inspired by adhesion examples commonly found in nature, we reached out to examine the effect of different kinds of heterogeneous surface properties that may replicate this behavior and the mechanisms at work. In order to do this, we used pulsed laser ablation on copper substrates (CuZn40) aiming to increase adhesion for bonding. A Yb-fiber laser was used for surface preparation of the substrates, which were probed with a Scanning Electron Microscope (SEM) and X-ray Photoelectron Spectroscopy (XPS). Heterogeneous surface properties were devised through the use of simplified laser micromachined patterns which may induce sequential events of crack arrest propagation, thereby having a leveraging effect on dissipation. The me- chanical performance of copper/epoxy joints with homogeneous and heterogeneous laser micromachined interfaces was then analyzed using the T-peel test. Fractured surfaces were analyzed using SEM to resolve the mechanism of failure and adhesive penetration within induced surface asperities from the treatment. Results confirm positive modifications of the surface morphology and chemistry from laser ablation that enable mechanical interlocking and cohesive failure within the adhesive layer. Remarkable improvements of apparent peel energy, bond toughness, and effective peel force were appreciated with respect to sanded substrates as control samples.

  11. Modeling and Experimental Study on Characterization of Micromachined Thermal Gas Inertial Sensors

    Directory of Open Access Journals (Sweden)

    Yan Su

    2010-09-01

    Full Text Available Micromachined thermal gas inertial sensors based on heat convection are novel devices that compared with conventional micromachined inertial sensors offer the advantages of simple structures, easy fabrication, high shock resistance and good reliability by virtue of using a gaseous medium instead of a mechanical proof mass as key moving and sensing elements. This paper presents an analytical modeling for a micromachined thermal gas gyroscope integrated with signal conditioning. A simplified spring-damping model is utilized to characterize the behavior of the sensor. The model relies on the use of the fluid mechanics and heat transfer fundamentals and is validated using experimental data obtained from a test-device and simulation. Furthermore, the nonideal issues of the sensor are addressed from both the theoretical and experimental points of view. The nonlinear behavior demonstrated in experimental measurements is analyzed based on the model. It is concluded that the sources of nonlinearity are mainly attributable to the variable stiffness of the sensor system and the structural asymmetry due to nonideal fabrication.

  12. A wafer mapping technique for residual stress in surface micromachined films

    Science.gov (United States)

    Schiavone, G.; Murray, J.; Smith, S.; Desmulliez, M. P. Y.; Mount, A. R.; Walton, A. J.

    2016-09-01

    The design of MEMS devices employing movable structures is crucially dependant on the mechanical behaviour of the deposited materials. It is therefore important to be able to fully characterize the micromachined films and predict with confidence the mechanical properties of patterned structures. This paper presents a characterization technique that enables the residual stress in MEMS films to be mapped at the wafer level by using microstructures released by surface micromachining. These dedicated MEMS test structures and the associated measurement techniques are used to extract localized information on the strain and Young’s modulus of the film under investigation. The residual stress is then determined by numerically coupling this data with a finite element analysis of the structure. This paper illustrates the measurement routine and demonstrates it with a case study using electrochemically deposited alloys of nickel and iron, particularly prone to develop high levels of residual stress. The results show that the technique enables wafer mapping of film non-uniformities and identifies wafer-to-wafer differences. A comparison between the results obtained from the mapping technique and conventional wafer bow measurements highlights the benefits of using a procedure tailored to films that are non-uniform, patterned and surface-micromachined, as opposed to simple standard stress extraction methods. The presented technique reveals detailed information that is generally unexplored when using conventional stress extraction methods such as wafer bow measurements.

  13. A finite element model of ultrasonic extrusion

    Energy Technology Data Exchange (ETDEWEB)

    Lucas, M [Department of Mechanical Engineering, University of Glasgow, G12 8QQ (United Kingdom); Daud, Y, E-mail: m.lucas@mech.gla.ac.u [College of Science and Technology, UTM City Campus, Kuala Lumpur (Malaysia)

    2009-08-01

    Since the 1950's researchers have carried out investigations into the effects of applying ultrasonic excitation to metals undergoing elastic and plastic deformation. Experiments have been conducted where ultrasonic excitation is superimposed in complex metalworking operations such as wire drawing and extrusion, to identify the benefits of ultrasonic vibrations. This study presents a finite element analysis of ultrasonic excitation applied to the extrusion of a cylindrical aluminium bar. The effects of friction on the extrusion load are reported for the two excitation configurations of radially and axially applied ultrasonic vibrations and the results are compared with experimental data reported in the literature.

  14. Acoustical cross-talk in row–column addressed 2-D transducer arrays for ultrasound imaging

    DEFF Research Database (Denmark)

    Christiansen, Thomas Lehrmann; Jensen, Jørgen Arendt; Thomsen, Erik Vilain

    2015-01-01

    The acoustical cross-talk in row–column addressed 2-D transducer arrays for volumetric ultrasound imaging is investigated. Experimental results from a 2.7 MHz, λ/2-pitch capacitive micromachined ultrasonic transducer (CMUT) array with 62 rows and 62 columns are presented and analyzed in the...

  15. Mutual Radiation Impedance of Uncollapsed CMUT Cells with Different Radii

    CERN Document Server

    Ozgurluk, Alper; Atalar, Abdullah; Koymen, Hayrettin

    2015-01-01

    A polynomial approximation is proposed for the mutual acoustic impedance between uncollapsed capacitive micromachined ultrasonic transducer (CMUT) cells with different radii in an infinite rigid baffle. The resulting approximation is employed in simulating CMUTs with a circuit model. A very good agreement is obtained with the corresponding finite element simulation (FEM) result.

  16. A 100 μm diameter capacitive pressure sensor with 50 MPa dynamic range

    Science.gov (United States)

    Luo, Xin; Gianchandani, Yogesh B.

    2016-04-01

    This paper presents fully sealed absolute capacitive pressure sensors for high-pressure applications in hydraulic environments. The sensors have a ø100 μm diaphragm and a nominal interelectrode gap of 3 μm. The interiors of the cavities are electrically isolated, allowing the sensors to operate at the high end of the pressure range with the center of the diaphragm in contact with the substrate beneath it. The sensors are monolithically fabricated using a combination of surface micromachining and through-wafer isolated bulk-silicon lead transfer for backside contacts. This structure allows the device footprints to be reduced to about 150  ×  150 μm2, and simplifies system integration. Fabricated sensors with diaphragm thicknesses of 3 μm (C100t3) and 5 μm (C100t5) are tested in an oil environment at pressures up to 20 MPa and 50 MPa, respectively. The average sensitivities are 7200 ppm MPa-1 (3.1 fF MPa-1) for C100t3, and 3400 ppm MPa-1 (1.6 fF MPa-1) for C100t5 in the non-contact mode. In the contact mode, the average sensitivities are 9900 ppm MPa-1 (5.3 fF MPa-1) for C100t3, and 3100 ppm MPa-1 (1.6 fF MPa-1) for C100t5. A multiphysics finite element analysis approach that accommodates contact mode simulations is also presented.

  17. Nanostructured conducting polymer based reagentless capacitive immunosensor.

    Science.gov (United States)

    Bandodkar, Amay Jairaj; Dhand, Chetna; Arya, Sunil K; Pandey, M K; Malhotra, Bansi D

    2010-02-01

    Nanostructured polyaniline (PANI) film electrophoretically fabricated onto indium-tin-oxide (ITO) coated glass plate has been utilized for development of an immunosensor based on capacitance change of a parallel plate capacitor (PPC) by covalently immobilizing anti-human IgG (Anti-HIgG) using N-ethyl-N'-(3-dimethylaminopropyl) carbodiimide and N-hydroxysuccinimide chemistry. These fabricated PANI/ITO and Anti-HIgG/PANI/ITO plates have been characterized using scanning electron microscopy, cyclic voltammetry, differential pulse voltammetry and Fourier transform infra-red studies. The capacitance measurements indicate that dielectric medium of this biologically modified PPC (Anti-HIgG/PANI/ITO) is sensitive to HIgG in 5 - 5 x 10(5) ng mL(-1) range and has lower detection limit of 1.87 ng mL(-1). The observed results reveal that this Anti-HIgG modified PPC can be used as a robust, easy-to-use, reagentless, sensitive and selective immunosensor for estimation of human IgG.

  18. THERMAL DRIFT CHARACTERISTICS OF CAPACITIVE PRESSURE SENSORS

    Directory of Open Access Journals (Sweden)

    ABDELAZIZ BEDDIAF

    2016-03-01

    Full Text Available The capacitive pressure sensors based on silicon are characterized by their very high sensitivities and their low power consumption. Nevertheless, their thermal behavior remains more or less unpredictable because they can indicate very high thermal coefficients. The study of the thermal behavior of these sensors is essential to define the parameters that cause the output characteristics drift. In this study, we modeled the thermal behavior of this sensors, using Finite Element Analysis (FEA made in COMSOL. The model solved by COMSOL environment takes into account the entire sensor and thermal effects due to the temperature considering the materials’ properties, the geometric shape and also the heat transfer mechanisms. By COMSOL we determine how the temperature affects the sensor during the manufacturing process. For that end, we calculated the thermal drift of capacitance at rest, the thermal coefficients and we compared them with experimental results to validate our model. Further, we studied the thermal drift of sensor characteristics both at rest and under constant and uniform pressure. Further, our study put emphasis on the geometric influence parameters on these characteristics to optimize the sensor performance. Finally, this study allows us to predict the sensor behavior against temperature and to minimize this effect by optimizing the geometrical parameters.

  19. Proportional microvolume capacitive liquid level sensor array.

    Science.gov (United States)

    Seliskar, D; Waterbury, R; Kearney, R

    2005-01-01

    A sensor array has been developed for use with laboratory automation to permit closed-loop control of liquid levels in a multiwell microplate geometry. We extended a simple electrical model for non-contact capacitance-based fluid sensors to describe a fluid-level dependency. The new model shows that a charge-transfer based capacitance transducer, employing a liquid-specific calibration, can be used to obtain an output signal that varies linearly with the liquid level. The calibration also compensates for liquid-to-liquid conductivity and permittivity differences. A prototype 3×3 sensor array was built and tested using NaCl and ethanol solutions to simulate the range of conductivity and permittivity typical in biological and chemical research. Calibrated output signals were linear with liquid volume for all tested solutions (R2>0.92). Measurement error averaged 1.3 % (2.0 μl) with a standard deviation of 6.0% (9.0 μl). These results demonstrate the feasibility of developing a microvolume sensor array in essentially any M×N microplate geometry. PMID:17281955

  20. A capacitive electrode with fast recovery feature

    International Nuclear Information System (INIS)

    Capacitive electrodes (CEs) allow for acquiring biopotentials without galvanic contact, avoiding skin preparation and the use of electrolytic gel. The signal quality provided by present CEs is similar to that of standard wet electrodes, but they are more sensitive to electrostatic charge interference and motion artifacts, mainly when biopotentials are picked up through clothing and coupling capacitances are reduced to tens of picofarads. When artifacts are large enough to saturate the preamplifier, several seconds (up to tens) are needed to recover a proper baseline level, and during this period biopotential signals are irremediably lost. To reduce this problem, a CE that includes a fast-recovery (FR) circuit is proposed. It works directly on the coupling capacitor, recovering the amplifier from saturation while preserving ultra-high input impedance, as a CE requires. A prototype was built and tested acquiring ECG signals. Several experimental data are presented, which show that the proposed circuit significantly reduces record segment losses due to amplifier saturation when working in real environments. (paper)

  1. Federal technology alert: Ultrasonic humidifiers

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1998-11-01

    Humidifiers are used in buildings to maintain humidity levels to ensure quality and handling capabilities in manufacturing processes, to lower the transmission rate of disease-causing bacteria in hospitals, to reduce static electricity in manufacturing clean rooms and in computer rooms, and to provide higher levels of employee comfort in offices. Ultrasonic humidifiers generate a water mist without raising its temperature. An electronic oscillation is converted to a mechanical oscillation using a piezo disk immersed in a reservoir of mineral-free water. The mechanical oscillation is directed at the surface of the water, where at very high frequencies it creates a very fine mist of water droplets. This adiabatic process, which does not heat the supply water, reduces humidifier energy use by 90 to 93% compared with systems that do boil the water. Ultrasonic humidifiers have been demonstrated to be more efficient and to require less maintenance than competing humidifier technologies such as electrode canisters, quartz lamps, and indirect steam-to-steam. They do not require anticorrosive additives that affect the indoor air quality of buildings using direct steam humidifiers. There are two potential disadvantages of ultrasonic humidifiers. They must use mineral-free, deionized water or water treated with reverse osmosis. Treated water reduces maintenance costs because it eliminates calcium deposits, but increases other operating costs. Also, the cool mist from ultrasonic humidifiers absorbs energy from the supply air as it evaporates and provides a secondary cooling effect.

  2. Calculations for Piezoelectric Ultrasonic Transducers

    DEFF Research Database (Denmark)

    Jensen, Henrik

    1986-01-01

    Analysis of piezoelectric ultrasonic transducers implies a solution of a boundary value problem, for a boay which consists of different materials, including a piezoelectric part. The problem is dynamic at frequencies, where a typical wavelength is somewhat less than the size of the body. Radiation...

  3. Atmospheric contamination during ultrasonic scaling

    NARCIS (Netherlands)

    Timmerman, MF; Menso, L; Steinfort, J; van Winkelhoff, AJ; van der Weijden, GA

    2004-01-01

    Objective: The aim of this study was to determine the microbial atmospheric contamination during initial periodontal treatment using a piezoelectric ultrasonic scaler in combination with either high-volume evacuation (HVE) or conventional dental suction (CDS). Methods: The study included 17 treatmen

  4. Ultrasonic/Sonic Impacting Penetrators

    Science.gov (United States)

    Bao, Xiaoqi; Bar-Cohen, Yoseph; Chang, Zensheu; Sherrit, Stewart; Stark, Randall A.

    2008-01-01

    Ultrasonic/sonic impacting penetrators (USIPs) are recent additions to the series of apparatuses based on ultrasonic/sonic drill corers (USDCs). A USIP enables a rod probe to penetrate packed soil or another substance of similar consistency, without need to apply a large axial force that could result in buckling of the probe or in damage to some buried objects. USIPs were conceived for use in probing and analyzing soil to depths of tens of centimeters in the vicinity of buried barrels containing toxic waste, without causing rupture of the barrels. USIPs could also be used for other purposes, including, for example, searching for pipes, barrels, or other hard objects buried in soil; and detecting land mines. USDCs and other apparatuses based on USDCs have been described in numerous previous NASA Tech Briefs articles. The ones reported previously were designed, variously, for boring into, and/or acquiring samples of, rock or other hard, brittle materials of geological interest. To recapitulate: A USDC can be characterized as a lightweight, low-power, piezoelectrically driven jackhammer in which ultrasonic and sonic vibrations are generated and coupled to a tool bit. As shown in the figure, a basic USDC includes a piezoelectric stack, a backing and a horn connected to the stack, a free mass (free in the sense that it can slide axially a short distance between the horn and the shoulder of tool bit), and a tool bit, i.e., probe for USIP. The piezoelectric stack is driven at the resonance frequency of the stack/horn/backing assembly to create ultrasonic vibrations that are mechanically amplified by the horn. To prevent fracture during operation, the piezoelectric stack is held in compression by a bolt. The bouncing of the free mass between the horn and the tool bit at sonic frequencies generates hammering actions to the bit that are more effective for drilling than is the microhammering action of ultrasonic vibrations in ordinary ultrasonic drills. The hammering actions

  5. A 5 meter range non-planar CMUT array for Automotive Collision Avoidance

    Science.gov (United States)

    Hernandez Aguirre, Jonathan

    A discretized hyperbolic paraboloid geometry capacitive micromachined ultrasonic transducer (CMUT) array has been designed and fabricated for automotive collision avoidance. The array is designed to operate at 40 kHz, beamwidth of 40° with a maximum sidelobe intensity of -10dB. An SOI based fabrication technology has been used for the 5x5 array with 5 sensing surfaces along each x and y axis and 7 elevation levels. An assembly and packaging technique has been developed to realize the non-planar geometry in a PGA-68 package. A highly accurate mathematical method has been presented for analytical characterization of capacitive micromachined ultrasonic transducers (CMUTs) built with square diaphragms. The method uses a new two-dimensional polynomial function to more accurately predict the deflection curve of a multilayer square diaphragm subject to both mechanical and electrostatic pressure and a new capacitance model that takes into account the contribution of the fringing field capacitances.

  6. Nonlinear dynamics of capacitive charging and desalination by porous electrodes

    NARCIS (Netherlands)

    Biesheuvel, P.M.; Bazant, M.Z.

    2010-01-01

    The rapid and efficient exchange of ions between porous electrodes and aqueous solutions is important in many applications, such as electrical energy storage by supercapacitors, water desalination and purification by capacitive deionization, and capacitive extraction of renewable energy from a salin

  7. Clean energy generation using capacitive electrodes in reverse electrodialysis

    NARCIS (Netherlands)

    Vermaas, D.A.; Bajracharya, S.; Bastos Sales, B.; Saakes, Michel; Hamelers, B.; Nijmeijer, D.C.

    2013-01-01

    Capacitive reverse electrodialysis (CRED) is a newly proposed technology to generate electricity from mixing of salt water and fresh water (salinity gradient energy) by using a membrane pile as in reverse electrodialysis (RED) and capacitive electrodes. The salinity difference between salt water and

  8. Large Capacitance Measurement by Multiple Uses of MBL Charge Sensor

    Science.gov (United States)

    Lee, Jung Sook; Chae, Min; Kim, Jung Bog

    2010-01-01

    A recent article by Morse described interesting electrostatics experiments using an MBL charge sensor. In this application, the charge sensor has a large capacitance compared to the charged test object, so nearly all charges can be transferred to the sensor capacitor from the capacitor to be measured. However, the typical capacitance of commercial…

  9. Electric field theory and the fallacy of void capacitance

    DEFF Research Database (Denmark)

    McAllister, Iain Wilson

    1991-01-01

    The concept of the capacitance of a gaseous void is discussed as applied to electrical insulation science. The most pertinent aspect of the capacitance definition is that of reference to a single-valued potential difference between surfaces. This implies that these surfaces must be surfaces...

  10. Polycrystalline VO2 film characterization by quantum capacitance measurement

    International Nuclear Information System (INIS)

    Capacitance measurement is performed using a home-built bridge on quasi two-dimensional vanadium dioxide films grown on silicon-dioxide/p-doped silicon substrates. Correlated effects appearing in the quantum capacitance are obtained as a function of temperature at low frequencies. The thermodynamic density of states reveals the opening band gap in the insulating monoclinic phase

  11. Traveling mirror compressor delay line with nonconstant capacitance

    OpenAIRE

    Bellan, P. M.

    1981-01-01

    The scaling relations for a traveling mirror magnetic compressor [P.M. Bellan, Phys. Rev. Lett. 43, 858 (1979)] having nonconstant capacitance are derived. Varying capacitance (rather than inductance) makes possible a lower impedance device, and hence, higher field levels or faster compression times.

  12. Capacitance tuning of nanoscale split-ring resonators

    DEFF Research Database (Denmark)

    Jeppesen, Claus; Mortensen, Asger; Kristensen, Anders

    2009-01-01

    We investigate the capacitance tuning of nanoscale split-ring resonators. Based on a simple inductor-capacitor circuit model, we derive an expression, where the inductance is proportional to the area while the capacitance reflects the aspect ratio of the slit. The resonance frequency may thus...

  13. Capacitance tuning of nanoscale split-ring resonators

    DEFF Research Database (Denmark)

    Jeppesen, Claus; Xiao, Sanshui; Mortensen, Niels Asger;

    2010-01-01

    In this paper, we investigate the capacitance tuning of nanoscale split-ring resonators. Based on a simple LC circuit model (LC-model), we derive an expression where the inductance is proportional to the area while the capacitance reflects the aspect ratio of the slit. The resonance frequency may...

  14. 石英微机械陀螺的研究进展%Reaearch Development of Quartz Micromachined Gyroscopes

    Institute of Scientific and Technical Information of China (English)

    关冉; 张卫平; 陈文元; 张弓; 成宇翔

    2012-01-01

    首先介绍了石英微机械陀螺基于压电效应和科氏加速度的工作原理,回顾了石英微机械陀螺的发展历程,并且介绍了石英微机械陀螺的国内外发展现状.然后,针对石英微机械陀螺不同的结构进行了分类,并且对于不同结构的石英微机械陀螺的具体加工工艺、性能参数、应用领域等进行了综述.最后,对不同结构类型的石英微机械陀螺的尺寸、加工工艺,检测轴向,精度等参数进行了总结和对比,在此基础上分析了石英微机械陀螺的发展趋势,并指出了石英微机械陀螺研究中存在的问题,例如石英加工过程中产生的侧壁晶棱的不平整、石英侧壁电极的制作困难以及石英微机械陀螺多轴化应用的限制等.%Firstly, the working principle of the quartz micromachined gyroscope is introduced, which is based on the piezoelectric effect and the Coriolis acceleration, the development history of the quartz micromachined gyroscope is reviewed, and the development present situation of the quartz micromachined gyroscope is introduced both domestically and abroad. Then, the quartz micromachined gyroscope is classified into several types according to its different structures, and the specific fabrication process, performance parameter and application fields of the quartz micromachined gyroscope for the different structures are reviewed. Finally, the parameters of the quartz micromachined gyroscope for the different kinds of structures are summarized and compared, including the size, fabrication process, detection axis and accuracy, and on that basis, the development trends of the quartz micromachined gyroscope are analyzed, and the problems that limit the development of quartz micromachined gyroscope are pointed out, including the uneven crystal edges of the quartz sidewall caused by the fabrication process, the difficulties of electrode fabrication on the quartz sidewall and the limitation of the multi

  15. Study of High Capacitance Ratios CPW MEMS Shunt Switches

    Institute of Scientific and Technical Information of China (English)

    Jianhai Sun; Dafu Cui

    2006-01-01

    This paper describes a fixed-fixed beam ohmic switch in series with a fixed capacitor as a replacement for a capacitive switch. In this switch, a metal plate deposited on the dielectric ensures perfectly contact with the dielectric layer in the down state. The area size of the metal plate directly influences the capacitance ratio of the switch, as the area size of the metal cap decreases, the capacitance ratio dramatically rises up. The down/up capacitance ratio can exceed 800 times over the conventional designs using the same materials and the equal size. Measurement results show that high capacitance ratio of the switches has a large effect on the isolation, and can actually improve the performance of the switches.

  16. Electrostatic capacitance and Faraday cage behavior of carbon nanotube forests

    Energy Technology Data Exchange (ETDEWEB)

    Ya' akobovitz, A. [Mechanosynthesis Group, Department of Mechanical Engineering, University of Michigan, Ann Arbor, Michigan 48109 (United States); Department of Mechanical Engineering, Faculty of Engineering Sciences, Ben-Gurion University, Beer-Sheva (Israel); Bedewy, M. [Mechanosynthesis Group, Department of Mechanical Engineering, University of Michigan, Ann Arbor, Michigan 48109 (United States); Hart, A. J. [Mechanosynthesis Group, Department of Mechanical Engineering, University of Michigan, Ann Arbor, Michigan 48109 (United States); Department of Mechanical Engineering and Laboratory for Manufacturing and Productivity, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139 (United States)

    2015-02-02

    Understanding of the electrostatic properties of carbon nanotube (CNT) forests is essential to enable their integration in microelectronic and micromechanical devices. In this study, we sought to understand how the hierarchical geometry and morphology of CNT forests determines their capacitance. First, we find that at small gaps, solid micropillars have greater capacitance, yet at larger gaps the capacitance of the CNT forests is greater. The surface area of the CNT forest accessible to the electrostatic field was extracted by analysis of the measured capacitance, and, by relating the capacitance to the average density of CNTs in the forest, we find that the penetration depth of the electrostatic field is on the order of several microns. Therefore, CNT forests can behave as a miniature Faraday cage. The unique electrostatic properties of CNT forests could therefore enable their use as long-range proximity sensors and as shielding elements for miniature electronic devices.

  17. Nonlinear Dynamics of Capacitive Charging and Desalination by Porous Electrodes

    CERN Document Server

    Biesheuvel, P M

    2009-01-01

    The rapid and efficient exchange of ions between porous electrodes and aqueous solutions is important in many applications, such as electrical energy storage by super-capacitors, water desalination and purification by capacitive deionization (or desalination), and capacitive extraction of renewable energy from a salinity difference. Here, we present a unified mean-field theory for capacitive charging and desalination by ideally polarizable porous electrodes (without Faradaic reactions or specific adsorption of ions) in the limit of thin double layers (compared to typical pore dimensions). We illustrate the theory in the case of a dilute, symmetric, binary electrolyte using the Gouy-Chapman-Stern (GCS) model of the double layer, for which simple formulae are available for salt adsorption and capacitive charging of the diffuse part of the double layer. We solve the full GCS mean-field theory numerically for realistic parameters in capacitive deionization, and we derive reduced models for two limiting regimes wi...

  18. Electrostatic capacitance and Faraday cage behavior of carbon nanotube forests

    International Nuclear Information System (INIS)

    Understanding of the electrostatic properties of carbon nanotube (CNT) forests is essential to enable their integration in microelectronic and micromechanical devices. In this study, we sought to understand how the hierarchical geometry and morphology of CNT forests determines their capacitance. First, we find that at small gaps, solid micropillars have greater capacitance, yet at larger gaps the capacitance of the CNT forests is greater. The surface area of the CNT forest accessible to the electrostatic field was extracted by analysis of the measured capacitance, and, by relating the capacitance to the average density of CNTs in the forest, we find that the penetration depth of the electrostatic field is on the order of several microns. Therefore, CNT forests can behave as a miniature Faraday cage. The unique electrostatic properties of CNT forests could therefore enable their use as long-range proximity sensors and as shielding elements for miniature electronic devices

  19. Study of CMOS integrated signal processing circuit in capacitive sensors

    Institute of Scientific and Technical Information of China (English)

    CAO Yi-jiang; YU Xiang; WANG Lei

    2007-01-01

    A CMOS integrated signal processing circuit based on capacitance resonance principle whose structure is simple in capacitive sensors is designed. The waveform of output voltage is improved by choosing bootstrap reference current mirror with initiate circuit, CMOS analogy switch and positive feedback of double-stage inverter in the circuit. Output voltage of this circuit is a symmetric square wave signal. The variation of sensitive capacitance, which is part of the capacitive sensors, can be denoted by the change of output voltage's frequency. The whole circuit is designed with 1.5 μm P-well CMOS process and simulated by PSpice software.Output frequency varies from 261.05 kHz to 47.93 kHz if capacitance varies in the range of 1PF~15PF. And the variation of frequency can be easily detected using counter or SCU.

  20. Fund allocation using capacitated vehicle routing problem

    Science.gov (United States)

    Mamat, Nur Jumaadzan Zaleha; Jaaman, Saiful Hafizah; Ahmad, Rokiah Rozita; Darus, Maslina

    2014-09-01

    In investment fund allocation, it is unwise for an investor to distribute his fund into several assets simultaneously due to economic reasons. One solution is to allocate the fund into a particular asset at a time in a sequence that will either maximize returns or minimize risks depending on the investor's objective. The vehicle routing problem (VRP) provides an avenue to this issue. VRP answers the question on how to efficiently use the available fleet of vehicles to meet a given service demand, subjected to a set of operational requirements. This paper proposes an idea of using capacitated vehicle routing problem (CVRP) to optimize investment fund allocation by employing data of selected stocks in the FTSE Bursa Malaysia. Results suggest that CRVP can be applied to solve the issue of investment fund allocation and increase the investor's profit.

  1. Further capacitive imaging experiments using modified probes

    Science.gov (United States)

    Yin, Xiaokang; Li, Zhen; Yan, An; Li, Wei; Chen, Guoming; Hutchins, David A.

    2016-02-01

    In recent years, capacitive imaging (CI) is growing in popularity within the NDE communities, as it has the potential to test materials and structures for defects that are not easily tested by other techniques. In previous work, The CI technique has been successfully used on a various types of materials, including concrete, glass/carbon fibre composite, steel, etc. In such CI experiments, the probes are normally with symmetric or concentric electrodes etched onto PCBs. In addition to these conventional coplanar PCB probes, modified geometries can be made and they can lead to different applications. A brief overview of these modified probes, including high resolution surface imaging probe, combined CI/eddy current probe, and CI probe using an oscilloscope probe as the sensing electrode, is presented in this work. The potential applications brought by these probes are also discussed.

  2. Phase discriminating capacitive array sensor system

    Science.gov (United States)

    Vranish, John M. (Inventor); Rahim, Wadi (Inventor)

    1993-01-01

    A phase discriminating capacitive sensor array system which provides multiple sensor elements which are maintained at a phase and amplitude based on a frequency reference provided by a single frequency stabilized oscillator. Sensor signals provided by the multiple sensor elements are controlled by multiple phase control units, which correspond to the multiple sensor elements, to adjust the sensor signals from the multiple sensor elements based on the frequency reference. The adjustment made to the sensor signals is indicated by output signals which indicate the proximity of the object. The output signals may also indicate the closing speed of the object based on the rate of change of the adjustment made, and the edges of the object based on a sudden decrease in the adjustment made.

  3. Capacitance multiplier and filter synthesizing network

    Science.gov (United States)

    Kline, A. J. (Inventor)

    1974-01-01

    A circuit using a differential amplifier multiplies the capacitance of a discrete interating capacitor by (r sub 1 + R sub 2)/R sub 2, where R sub 1 and R sub 2 are values of discrete resistor coupling an input signal e sub 1 of the amplifier inputs. The output e sub 0 of the amplifier is fed back and added to the signal coupled by the resistor R sub 2 to the amplifier through a resistor of value R sub 1. A discrete resistor R sub x may be connected in series for a lag filter, and a discrete resistor may be connected in series with the capacitor for a lead-lag filter. Voltage dividing resistors R sub a and R sub b may be included in the feedback circuit of the amplifier output e sub o to independently adjust the circuit gain e sub i/e sub o.

  4. A capacitive bioelectrode for recording electrophysiological signals

    International Nuclear Information System (INIS)

    In this paper we describe a gel-free sensor with on-board electrode design, which capacitive couples to the skin to detect the electrical activity in the body. The integrated sensor is manufactured on a standard printed circuit board within 2.2 cm diameter enclosure that can operate through fabric or other insulation. The electrode includes amplification (60db gain) and passive band pass filtering (0.5 to 100 Hz). Active shielding surrounding the sensor plate is used to reduce noise pickup. The input referred noise, measured over the electrode bandwidth is 4 μV rms at 0.2 mm sensor distance, and 16 μV rms at 1.2 mm distance trough two cotton cloths. The bioelectrodes were coupled to the scalp trough hair for EEG signals (with 80 db gain), and coupled to the chest through clothing for ECG signals. The recorded signals show well performance of the designed bielectrode. (Author)

  5. [Wireless ECG measurement system with capacitive coupling].

    Science.gov (United States)

    Aleksandrowicz, Adrian; Walter, Marian; Leonhardt, Steffen

    2007-04-01

    This paper describes a measurement system that captures an electrocardiogram (ECG) using capacitively coupled electrodes. The measurement system was integrated into an off-the-shelf office chair (so-called "Aachen SmartChair"). Whereas for classical ECG measurement adhesive is used to attach conductively coupled electrodes to bare skin, the system presented allows ECG measurement through clothing without direct skin contact. Furthermore, a ZigBee communication module was integrated to allow wireless transmission of ECG data to a PC or an ICU patient monitor. For system validation, classical ECG using conductive electrodes was obtained simultaneously. First measurement results, including variations of cloth thickness and material, are presented and some of the system-specific problems of this approach are discussed.

  6. MOS Capacitance-Voltage Characteristics Ⅲ.Trapping Capacitance from 2-Charge-State Impurities

    Institute of Scientific and Technical Information of China (English)

    Jie Binbin; Sah Chihtang

    2011-01-01

    Low-frequency and high-frequency capacitance-voltage curves of Metal-Oxide-Semiconductor Capacitors are presented to illustrate giant electron and hole trapping capacitances at many simultaneously present two-charge-state and one-trapped-carrier,or one-energy-level impurity species.Models described include a donor electron trap and an acceptor hole trap,both donors,both acceptors,both shallow energy levels,both deep,one shallow and one deep,and the identical donor and acceptor.Device and material parameters are selected to simulate chemically and physically realizable capacitors for fundamental trapping parameter characterizations and for electrical and optical signal processing applications.

  7. An integrated interface circuit with a capacitance-to-voltage converter as front-end for grounded capacitive sensors

    NARCIS (Netherlands)

    Heidary, A.; Meijer, G.C.M.

    2009-01-01

    This paper presents the analysis and design of an integrated interface for grounded capacitive sensors. To reduce the effects of parasitic cable capacitances, a feedforward technique has been applied. In combination with the use of a special front-end amplifier this yields high immunity for a parasi

  8. The hysteresis-free negative capacitance field effect transistors using non-linear poly capacitance

    Science.gov (United States)

    Fan, S.-T.; Yan, J.-Y.; Lai, D.-C.; Liu, C. W.

    2016-08-01

    A gate structure design for negative capacitance field effect transistors (NCFETs) is proposed. The hysteresis loop in current-voltage performances is eliminated by the nonlinear C-V dependence of polysilicon in the gate dielectrics. Design considerations and optimizations to achieve the low SS and hysteresis-free transfer were elaborated. The effects of gate-to-source/drain overlap, channel length scaling, interface trap states and temperature impact on SS are also investigated.

  9. Characterization of electrical and mechanical activities of rabbit uterus associated with the presence of capacitated and non-capacitated spermatozoa

    Directory of Open Access Journals (Sweden)

    J.F. Lazcano-Reyes

    2013-12-01

    Full Text Available To investigate the effects capacitated spermatozoa may exert upon motility of the rabbit uterus, both contractility and electrical activity (frequency and intensity were measured in 3 distinctive uterine segments of anaesthetized does: horn (UH, uterotubal junction (UTJ and tube (UT after 1 natural mating, 2 infusion of either seminal plasma or PBS, 3 infusion of either capacitated or non-capacitated spermatozoa. Basal values were: 17.1, 15.7, 16.4 g (contractility, P>0.05; 3.5, 3.5, 3.4 Hz (frequency, P>0.05; 0.49, 0.50, 0.57 μV (intensity, P>0.05 for UH, UTJ, UT, respectively. Seminal plasma caused an increase (P<0.05 in the UH contractility: 26.3 vs. 11.7 (natural mating and 17.0 g (PBS; it also caused a decrease (P<0.05 in electrical intensity at the UTJ: 0.24 vs. 0.67 (natural mating and 0.58 μV (PBS. The presence of either capacitated or non-capacitated spermatozoa caused no changes in contractility and electrical frequency in any of the uterine segments. However, there was a change in electrical intensity at UTJ (0.37 vs. 0.57 μV for non-capacitated and capacitated spermatozoa, respectively; P<0.05. There were also differences between segments by treatment: UTJ (0.37 vs. UT (0.59 μV for non-capacitated; UH (0.46 vs. UT (0.71 μV for capacitated spermatozoa (P<0.05. In conclusion, use of this experimental model showed that uterine electrical activity was slightly modified by the presence of capacitated spermatozoa.

  10. Computer-controlled Sophisticated Ultrasonic Cleaner

    Directory of Open Access Journals (Sweden)

    H. Muthurajan

    2007-01-01

    Full Text Available The significant advantage of ultrasonic cleaning technique is the abilities to clean the delicateand complex shape materials without damaging their surfaces quickly. Ultrasonic cleaners havefound increasing applications in a variety of industries because these offer an environmentallygood alternative to ozone-depleting compounds and hazardous solvents. Also, ultrasonicvibration is one of the methods for chemical synthesis (chemical reaction and of yieldenhancement of chemical engineering process. Consequently, there is a need to developmultipurpose ultrasonic cleaner/vibrator using computer control, which can be used to set thevarious performance parameter of ultrasonic vibrator such as frequency, duty cycle, continuous/pulsed mode, duration of operation, and thermal profile of tank during the process. An ultrasoniccleaner was developed using an oscillator circuit and the duration of oscillator circuit functioningcan be set through the computer. Computerised ultrasonic cleaner using indigenously madepiezoceramic transducers and their advantages over the conventional ultrasonic cleaners are discussed.

  11. Picosecond and nanosecond pulse delivery through a hollow-core Negative Curvature Fiber for micro-machining applications.

    Science.gov (United States)

    Jaworski, Piotr; Yu, Fei; Maier, Robert R J; Wadsworth, William J; Knight, Jonathan C; Shephard, Jonathan D; Hand, Duncan P

    2013-09-23

    We present high average power picosecond and nanosecond pulse delivery at 1030 nm and 1064 nm wavelengths respectively through a novel hollow-core Negative Curvature Fiber (NCF) for high-precision micro-machining applications. Picosecond pulses with an average power above 36 W and energies of 92 µJ, corresponding to a peak power density of 1.5 TWcm⁻² have been transmitted through the fiber without introducing any damage to the input and output fiber end-faces. High-energy nanosecond pulses (>1 mJ), which are ideal for micro-machining have been successfully delivered through the NCF with a coupling efficiency of 92%. Picosecond and nanosecond pulse delivery have been demonstrated in fiber-based laser micro-machining of fused silica, aluminum and titanium.

  12. The Laser MicroJet (LMJ): a multi-solution technology for high quality micro-machining

    Science.gov (United States)

    Mai, Tuan Anh; Richerzhagen, Bernold; Snowdon, Paul C.; Wood, David; Maropoulos, Paul G.

    2007-02-01

    The field of laser micromachining is highly diverse. There are many different types of lasers available in the market. Due to their differences in irradiating wavelength, output power and pulse characteristic they can be selected for different applications depending on material and feature size [1]. The main issues by using these lasers are heat damages, contamination and low ablation rates. This report examines on the application of the Laser MicroJet(R) (LMJ), a unique combination of a laser beam with a hair-thin water jet as a universal tool for micro-machining of MEMS substrates, as well as ferrous and non-ferrous materials. The materials include gallium arsenide (GaAs) & silicon wafers, steel, tantalum and alumina ceramic. A Nd:YAG laser operating at 1064 nm (infra red) and frequency doubled 532 nm (green) were employed for the micro-machining of these materials.

  13. Ultrasonic measurement of liquid flow

    International Nuclear Information System (INIS)

    The measurement of flow speeds and levels of filling in pipelines and vessels requires a process of measurement to which the medium inside the pipe or the vessel is accessible. This problem can be solved by ultrasonics: Ultrasonics can 'penetrate' solids and liquids and therefore give access to the medium from outside. In this article, a survey is given in the first part on various techniques for measuring the speed of flow of liquids. The physical principles are introduced and the boundary conditions are discussed. In the second part, a practical example of measuring the level of filling in vessels and pipelines from outside at temperatures up to 300 C is given. (orig./HM)

  14. Arrayed architectures for multi-stage Si-micromachined high-flow Knudsen pumps

    International Nuclear Information System (INIS)

    This paper reports an evaluation and a comparison of two architectures for implementing Si-micromachined high-flow Knudsen pumps. Knudsen pumps, which operate on the principle of thermal transpiration, have been shown to have great promise for micro-scale gas phase fluidic systems such as micro gas chromatographs. Simultaneously achieving both a high flow rate and adequate blocking pressure has been a persistent challenge, which is addressed in this work by combining multiple pumps in series and addressing the resulting challenges in thermal management. The basic building block is a Si-micromachined pump with  ≈100 000 parallel channels in a 4 mm  ×  6 mm footprint. In the primary approach, multiple pump stages are stacked vertically with interleaved Si-micromachined spacers. A stacked 4-stage Knudsen pump has a form factor of 10 mm  ×  8 mm  ×  6 mm. In an alternate approach, multiple stages are arranged in a planar array. The experimental results demonstrate multiplication of the output pressure head with the number of stages, while the flow rate is maintained. For example, a stacked 4-stage Knudsen pump with 8 W power operated at atmospheric pressure provided a blocking pressure of 0.255 kPa, which was 3.6  ×  of that provided by a single-stage pump with 2 W power; while both provided a  ≈  30 sccm maximum flow rate. The performance can be customized for practical applications such as micro gas chromatography. (paper)

  15. Arrayed architectures for multi-stage Si-micromachined high-flow Knudsen pumps

    Science.gov (United States)

    Qin, Yutao; An, Seungdo; Gianchandani, Yogesh B.

    2015-11-01

    This paper reports an evaluation and a comparison of two architectures for implementing Si-micromachined high-flow Knudsen pumps. Knudsen pumps, which operate on the principle of thermal transpiration, have been shown to have great promise for micro-scale gas phase fluidic systems such as micro gas chromatographs. Simultaneously achieving both a high flow rate and adequate blocking pressure has been a persistent challenge, which is addressed in this work by combining multiple pumps in series and addressing the resulting challenges in thermal management. The basic building block is a Si-micromachined pump with  ≈100 000 parallel channels in a 4 mm  ×  6 mm footprint. In the primary approach, multiple pump stages are stacked vertically with interleaved Si-micromachined spacers. A stacked 4-stage Knudsen pump has a form factor of 10 mm  ×  8 mm  ×  6 mm. In an alternate approach, multiple stages are arranged in a planar array. The experimental results demonstrate multiplication of the output pressure head with the number of stages, while the flow rate is maintained. For example, a stacked 4-stage Knudsen pump with 8 W power operated at atmospheric pressure provided a blocking pressure of 0.255 kPa, which was 3.6  ×  of that provided by a single-stage pump with 2 W power; while both provided a  ≈  30 sccm maximum flow rate. The performance can be customized for practical applications such as micro gas chromatography.

  16. Ultrasonic wall thickness measurement without coupling liquid

    International Nuclear Information System (INIS)

    If the material measured is part of the ultrasonic transducer, then one can do without the usual coupling liquid for ultrasonic measurement of wall thickness. Measuring equipment works on the basis of this electro-dynamic ultrasonic transducer, which has been developed to check the wall thickness (3 to 30 mm) of steel pipes with outside diameters of 25 to 180 mm. Double errors and local changes of wall thickness can be detected. (orig.)

  17. Studies on Ultrasonic Spray Dryer (1)

    OpenAIRE

    井上, 昌夫

    1981-01-01

    Author has initiated research and development activities for a epochal ultrasonic spray dryer in order to obtain large quantities of droplets in uniform diameters, from which a practically applicable ultrasonic spray dryer would possibly be developed. Since the time Wood, Loomis et al. reported their experiments on atomization of liquids by ultrasonic power, research in this field is now widely attempted in many countries. In Japan, this field is being investigated by Ohno et al. Chiba, and M...

  18. Ultrasonic Verification of Composite Structures

    OpenAIRE

    Pelt, Maurice; Boer, Robert Jan,; Schoemaker, Christiaan; Sprik, Rudolf

    2014-01-01

    International audience Ultrasonic Verification is a new method for the monitoring large surface areas of CFRP by ultrasound with few sensors. The echo response of a transmitted pulse through the structure is compared with the response of an earlier obtained reference signal to calculate a fidelity parameter. A change in fidelity over time is indicative for a new defect in the structure. This paper presents an experimental assessment of the effectiveness and reproducibility of the method.

  19. High temperature ultrasonic transducers: review

    OpenAIRE

    Kažys, R.; Voleišis, A.; Voleišienė, B.

    2008-01-01

    The problems of development of high-temperature ultrasonic transducers for modern science and technology applications are analysed. More than 10 piezoelectric materials suitable for operation at high temperatures are overviewed. It is shown that bismuth titanate based piezoelectric elements are most promisable. Bonding methods of piezoelectric elements to a protector and backing are discussed. Thermosonic gold-to-gold bonding is most modern and possesses unique features. Our achievements in t...

  20. Weed discrimination using ultrasonic sensors

    OpenAIRE

    Andújar, Dionisio; Escolà i Agustí, Alexandre; Dorado, José; Fernández-Quintanilla, César

    2011-01-01

    A new approach is described for automatic discrimination between grasses and broad-leaved weeds, based on their heights. An ultrasonic sensor was mounted on the front of a tractor, pointing vertically down in the inter-row area, with a control system georeferencing and registering the echoes reflected by the ground or by the various leaf layers. Static measurements were taken at locations with different densities of grasses (Sorghum halepense) and broad-leaved weeds (Xanthium strumarium and D...