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Sample records for capacitive micromachined ultrasonic

  1. Acoustic lens for capacitive micromachined ultrasonic transducers

    International Nuclear Information System (INIS)

    Capacitive micromachined ultrasonic transducers (CMUTs) have great potential to compete with traditional piezoelectric transducers in therapeutic ultrasound applications. In this paper we have designed, fabricated and developed an acoustic lens formed on the CMUT to mechanically focus ultrasound. The acoustic lens was designed based on the paraxial theory and made of silicone rubber for acoustic impedance matching and encapsulation. The CMUT was fabricated based on the local oxidation of silicon (LOCOS) and fusion-bonding. The fabricated CMUT was verified to behave like an electromechanical resonator in air and exhibited wideband response with a center frequency of 2.2 MHz in immersion. The fabrication for the acoustic lens contained two consecutive mold castings and directly formed on the surface of the CMUT. Applied with ac burst input voltages at the center frequency, the CMUT with the acoustic lens generated an output pressure of 1.89 MPa (peak-to-peak) at the focal point with an effective focal gain of 3.43 in immersion. Compared to the same CMUT without a lens, the CMUT with the acoustic lens demonstrated the ability to successfully focus ultrasound and provided a viable solution to the miniaturization of the multi-modality forward-looking endoscopes without electrical focusing. (paper)

  2. Capacitive Micromachined Ultrasonic Transducers (CMUTs for Underwater Imaging Applications

    Directory of Open Access Journals (Sweden)

    Jinlong Song

    2015-09-01

    Full Text Available A capacitive micromachined ultrasonic transducer structure for use in underwater imaging is designed, fabricated and tested in this paper. In this structure, a silicon dioxide insulation layer is inserted between the top electrodes and the vibration membrane to prevent ohmic contact. The capacitance-voltage (C-V characteristic curve shows that the transducer offers suitable levels of hysteresis and repeatability performance. The −6 dB center frequency is 540 kHz and the transducer has a bandwidth of 840 kHz for a relative bandwidth of 155%. Underwater pressure of 143.43 Pa is achieved 1 m away from the capacitive micromachined ultrasonic transducer under 20  excitation. Two-dimensional underwater ultrasonic imaging, which is able to prove that a rectangular object is present underwater, is achieved. The results presented here indicate that our work will be highly beneficial for the establishment of an underwater ultrasonic imaging system.

  3. Development of capacitive micromachined ultrasonic transducer for noncontact ultrasonic detection

    International Nuclear Information System (INIS)

    In this study, the capacitive micromachined ultrasonic transducer (cMUT) was developed. Theoretical analysis and finite element analysis of the behavior of membrane (such as resonance frequency, membrane deflection, collapse deflection and collapse voltage) of the cMUT were performed. The design parameters of the cMUT were estimated and are the dimension and thickness of membrane, thickness of sacrificial layer, thickness and size of electrode, size of active element and so on. With the micro-fabrication process, the cMUT was fabricated on the silicon wafer. To measure the membrane displacement of cMUT, the Michelson phase modulation fiber interferometer was constructed. The measured membrane displacement was good agreed with the result of finite element analysis. To estimate the ultrasonic wave generated by the cMUT, the ultrasonic transceiver system was constructed. The developed cMUT shows a good performance and hence will be widely used to the filed of non-contact ultrasonic application.

  4. Encapsulation of Capacitive Micromachined Ultrasonic Transducers Using Viscoelastic Polymer

    OpenAIRE

    Lin, Der-Song; Zhuang, Xuefeng; Wong, Serena H.; Kupnik, Mario; Khuri-Yakub, Butrus Thomas

    2010-01-01

    The packaging of a medical imaging or therapeutic ultrasound transducer should provide protective insulation while maintaining high performance. For a capacitive micromachined ultrasonic transducer (CMUT), an ideal encapsulation coating would therefore require a limited and predictable change on the static operation point and the dynamic performance, while insulating the high dc and dc actuation voltages from the environment. To fulfill these requirements, viscoelastic materials, such as poly...

  5. Capacitive micromachined ultrasonic transducer arrays as tunable acoustic metamaterials

    OpenAIRE

    Lani, Shane W.; Wasequr Rashid, M.; Hasler, Jennifer; Sabra, Karim G.; Levent Degertekin, F.

    2014-01-01

    Capacitive Micromachined Ultrasonic Transducers (CMUTs) operating in immersion support dispersive evanescent waves due to the subwavelength periodic structure of electrostatically actuated membranes in the array. Evanescent wave characteristics also depend on the membrane resonance which is modified by the externally applied bias voltage, offering a mechanism to tune the CMUT array as an acoustic metamaterial. The dispersion and tunability characteristics are examined using a computationally ...

  6. Capacitive micromachined ultrasonic transducer arrays as tunable acoustic metamaterials.

    Science.gov (United States)

    Lani, Shane W; Wasequr Rashid, M; Hasler, Jennifer; Sabra, Karim G; Levent Degertekin, F

    2014-02-01

    Capacitive Micromachined Ultrasonic Transducers (CMUTs) operating in immersion support dispersive evanescent waves due to the subwavelength periodic structure of electrostatically actuated membranes in the array. Evanescent wave characteristics also depend on the membrane resonance which is modified by the externally applied bias voltage, offering a mechanism to tune the CMUT array as an acoustic metamaterial. The dispersion and tunability characteristics are examined using a computationally efficient, mutual radiation impedance based approach to model a finite-size array and realistic parameters of variation. The simulations are verified, and tunability is demonstrated by experiments on a linear CMUT array operating in 2-12 MHz range. PMID:24753623

  7. Capacitive micromachined ultrasonic transducer arrays as tunable acoustic metamaterials

    International Nuclear Information System (INIS)

    Capacitive Micromachined Ultrasonic Transducers (CMUTs) operating in immersion support dispersive evanescent waves due to the subwavelength periodic structure of electrostatically actuated membranes in the array. Evanescent wave characteristics also depend on the membrane resonance which is modified by the externally applied bias voltage, offering a mechanism to tune the CMUT array as an acoustic metamaterial. The dispersion and tunability characteristics are examined using a computationally efficient, mutual radiation impedance based approach to model a finite-size array and realistic parameters of variation. The simulations are verified, and tunability is demonstrated by experiments on a linear CMUT array operating in 2-12 MHz range

  8. Capacitive micromachined ultrasonic transducer arrays as tunable acoustic metamaterials

    Energy Technology Data Exchange (ETDEWEB)

    Lani, Shane W., E-mail: shane.w.lani@gmail.com, E-mail: karim.sabra@me.gatech.edu, E-mail: levent.degertekin@me.gatech.edu; Sabra, Karim G. [George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, 801Ferst Drive, Georgia 30332-0405 (United States); Wasequr Rashid, M.; Hasler, Jennifer [School of Electrical and Computer Engineering, Georgia Institute of Technology, Van Leer Electrical Engineering Building, 777 Atlantic Drive NW, Atlanta, Georgia 30332-0250 (United States); Levent Degertekin, F. [George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, 801Ferst Drive, Georgia 30332-0405 (United States); School of Electrical and Computer Engineering, Georgia Institute of Technology, Van Leer Electrical Engineering Building, 777 Atlantic Drive NW, Atlanta, Georgia 30332-0250 (United States)

    2014-02-03

    Capacitive Micromachined Ultrasonic Transducers (CMUTs) operating in immersion support dispersive evanescent waves due to the subwavelength periodic structure of electrostatically actuated membranes in the array. Evanescent wave characteristics also depend on the membrane resonance which is modified by the externally applied bias voltage, offering a mechanism to tune the CMUT array as an acoustic metamaterial. The dispersion and tunability characteristics are examined using a computationally efficient, mutual radiation impedance based approach to model a finite-size array and realistic parameters of variation. The simulations are verified, and tunability is demonstrated by experiments on a linear CMUT array operating in 2-12 MHz range.

  9. Encapsulation of Capacitive Micromachined Ultrasonic Transducers Using Viscoelastic Polymer.

    Science.gov (United States)

    Lin, Der-Song; Zhuang, Xuefeng; Wong, Serena H; Kupnik, Mario; Khuri-Yakub, Butrus Thomas

    2010-12-01

    The packaging of a medical imaging or therapeutic ultrasound transducer should provide protective insulation while maintaining high performance. For a capacitive micromachined ultrasonic transducer (CMUT), an ideal encapsulation coating would therefore require a limited and predictable change on the static operation point and the dynamic performance, while insulating the high dc and dc actuation voltages from the environment. To fulfill these requirements, viscoelastic materials, such as polydimethylsiloxane (PDMS), were investigated for an encapsulation material. In addition, PDMS, with a glass-transition temperature below room temperature, provides a low Young's modulus that preserves the static behavior; at higher frequencies for ultrasonic operation, this material becomes stiffer and acoustically matches to water. In this paper, we demonstrate the modeling and implementation of the viscoelastic polymer as the encapsulation material. We introduce a finite element model (FEM) that addresses viscoelasticity. This enables us to correctly calculate both the static operation point and the dynamic behavior of the CMUT. CMUTs designed for medical imaging and therapeutic ultrasound were fabricated and encapsulated. Static and dynamic measurements were used to verify the FEM and show excellent agreement. This paper will help in the design process for optimizing the static and the dynamic behavior of viscoelastic-polymer-coated CMUTs. PMID:21170294

  10. Experimental Analysis of Bisbenzocyclobutene Bonded Capacitive Micromachined Ultrasonic Transducers.

    Science.gov (United States)

    Manwar, Rayyan; Chowdhury, Sazzadur

    2016-01-01

    Experimental measurement results of a 1.75 mm × 1.75 mm footprint area Capacitive Micromachined Ultrasonic Transducer (CMUT) planar array fabricated using a bisbenzocyclobutene (BCB)-based adhesive wafer bonding technique has been presented. The array consists of 40 × 40 square diaphragm CMUT cells with a cavity thickness of 900 nm and supported by 10 µm wide dielectric spacers patterned on a thin layer of BCB. A 150 µm wide one µm thick gold strip has been used as the contact pad for gold wire bonding. The measured resonant frequency of 19.3 MHz using a Polytec™ laser Doppler vibrometer (Polytec™ MSA-500) is in excellent agreement with the 3-D FEA simulation result using IntelliSuite™. An Agilent ENA5061B vector network analyzer (VNA) has been used for impedance measurement and the resonance and anti-resonance values from the imaginary impedance curve were used to determine the electromechanical coupling co-efficient. The measured coupling coefficient of 0.294 at 20 V DC bias exhibits 40% higher transduction efficiency as compared to a measured value published elsewhere for a silicon nitride based CMUT. A white light interferometry method was used to measure the diaphragm deflection profiles at different DC bias. The diaphragm center velocity was measured for different sub-resonant frequencies using a Polytec™ laser Doppler vibrometer that confirms vibration of the diaphragm at different excitation frequencies and bias voltages. Transmit and receive operations of CMUT cells were characterized using a pitch-catch method and a -6 dB fractional bandwidth of 23% was extracted from the received signal in frequency domain. From the measurement, it appears that BCB-based CMUTs offer superior transduction efficiency as compared to silicon nitride or silicon dioxide insulator-based CMUTs, and provide a very uniform deflection profile thus making them a suitable candidate to fabricate highly energy efficient CMUTs. PMID:27347955

  11. Singulation for imaging ring arrays of capacitive micromachined ultrasonic transducers

    International Nuclear Information System (INIS)

    Singulation of MEMS is a critical step in the transition from wafer-level to die-level devices. As is the case for capacitive micromachined ultrasound transducer (CMUT) ring arrays, an ideal singulation must protect the fragile membranes from the processing environment while maintaining a ring array geometry. The singulation process presented in this paper involves bonding a trench-patterned CMUT wafer onto a support wafer, deep reactive ion etching (DRIE) of the trenches, separating the CMUT wafer from the support wafer and de-tethering the CMUT device from the CMUT wafer. The CMUT arrays fabricated and singulated in this process were ring-shaped arrays, with inner and outer diameters of 5 mm and 10 mm, respectively. The fabricated CMUT ring arrays demonstrate the ability of this method to successfully and safely singulate the ring arrays and is applicable to any arbitrary 2D shaped MEMS device with uspended microstructures, taking advantage of the inherent planar attributes of DRIE. (technical note)

  12. Capacitive micromachined ultrasonic transducer for ultra-low pressure measurement: Theoretical study

    OpenAIRE

    Zhikang Li; Libo Zhao; Zhuangde Jiang; Sina Akhbari; Jianjun Ding; Yihe Zhao; Yulong Zhao; Liwei Lin

    2015-01-01

    Ultra-low pressure measurement is necessary in many areas, such as high-vacuum environment monitoring, process control and biomedical applications. This paper presents a novel approach for ultra-low pressure measurement where capacitive micromachined ultrasonic transducers (CMUTs) are used as the sensing elements. The working principle is based on the resonant frequency shift of the membrane under the applied pressure. The membranes of the biased CMUTs can produce a larger resonant frequency ...

  13. Modeling and Design of Capacitive Micromachined Ultrasonic Transducers Based-on Database Optimization

    International Nuclear Information System (INIS)

    A Capacitive Micromachined Ultrasonic Transducers simulation database, based on electromechanical coupling theory, has been fully developed for versatile capacitive microtransducer design and analysis. Both arithmetic and graphic configurations are used to find optimal parameters based on serial coupling simulations. The key modeling parameters identified can improve microtransducer's character and reliability effectively. This method could be used to reduce design time and fabrication cost, eliminating trial-and-error procedures. Various microtransducers, with optimized characteristics, can be developed economically using the developed database. A simulation to design an ultrasonic microtransducer is completed as an executed example. The dependent relationship between membrane geometry, vibration displacement and output response is demonstrated. The electromechanical coupling effects, mechanical impedance and frequency response are also taken into consideration for optimal microstructures. The microdevice parameters with the best output signal response are predicted, and microfabrication processing constraints and realities are also taken into consideration

  14. Development of Capacitive Micromachined Ultrasonic Transducer (I) - Analysis of the Membrane Behavior

    International Nuclear Information System (INIS)

    This study was conducted to develop a capacitive micromachined ultrasonic transducer (cMUT) which enable to high efficient non-contact transmit and receive the ultrasonic wave in air. Theoretical analysis and finite element analysis of the behavior of membrane (such as resonance frequency, membrane deflection, collapse deflection and collapse voltage) of the cMUT were performed. The design parameters of the cMUT such as the dimension and thickness of membrane, thickness of sacrificial layer, thickness and size of electrode were estimated. The resonance frequency of the membrane increased as the thickness of the membrane increased but decreased as the diameter of the membrane increased. The deflection of the membrane increased as d-c bias voltage increased. The collapse voltage of the membrane was analyzed

  15. Capacitive micromachined ultrasonic transducers with diffraction-based integrated optical displacement detection.

    Science.gov (United States)

    Hall, Neal A; Lee, Wook; Degertekin, F Levent

    2003-11-01

    Capacitive detection limits the performance of capacitive micromachined ultrasonic transducers (CMUTs) by providing poor sensitivity below megahertz frequencies and limiting acoustic power output by imposing constraints on the membrane-substrate gap height. In this paper, an integrated optical interferometric detection method for CMUTs, which provides high displacement sensitivity independent of operation frequency and device capacitance, is reported. The method also enables optoelectronics integration in a small volume and provides optoelectronic isolation between transmit and receive electronics. Implementation of the method involves fabricating CMUTs on transparent substrates and shaping the electrode under each individual CMUT membrane in the form of an optical diffraction grating. Each CMUT membrane thus forms a phase-sensitive optical diffraction grating structure that is used to measure membrane displacements down to 2 x 10(-4) A/square root(Hz) level in the dc to 2-MHz range. Test devices are fabricated on quartz substrates, and ultrasonic array imaging in air is performed using a single 4-mm square CMUT consisting of 19 x 19 array of membranes operating at 750 kHz. PMID:14682641

  16. Fabrication of Vacuum-Sealed Capacitive Micromachined Ultrasonic Transducer Arrays Using Glass Reflow Process

    Directory of Open Access Journals (Sweden)

    Nguyen Van Toan

    2016-04-01

    Full Text Available This paper presents a process for the fabrication of vacuum-sealed capacitive micromachined ultrasonic transducer (CMUT arrays using glass reflow and anodic bonding techniques. Silicon through-wafer interconnects have been investigated by the glass reflow process. Then, the patterned silicon-glass reflow wafer is anodically bonded to an SOI (silicon-on-insulator wafer for the fabrication of CMUT devices. The CMUT 5 × 5 array has been successfully fabricated. The resonant frequency of the CMUT array with a one-cell radius of 100 µm and sensing gap of 3.2 µm (distance between top and bottom electrodes is observed at 2.84 MHz. The Q factor is approximately 1300 at pressure of 0.01 Pa.

  17. Modeling and analysis of the membrane-behavior in capacitive micromachined ultrasonic transducer

    International Nuclear Information System (INIS)

    In this study, theoretical analysis and finite element analysis of the behavior of membrane (such as resonance frequency, membrane deflection, collapse deflection and collapse voltage) in the capacitive micromachined ultrasonic transducer (cMUT) were performed. The design parameter of the cMUT were estimated and are the dimension and thickness of membrane, thickness of sacrificed layer, thickness and size of electrode, size of active element and so on. The resonance frequency of the membrane increased as the thickness of the membrane increased but decreased as the diameter of the membrane increased. The deflection of the membrane increased as d-c bias voltage increased. The collapse voltage of the membrane was predicted.

  18. Modeling and analysis of the membrane-behavior in capacitive micromachined ultrasonic transducer

    International Nuclear Information System (INIS)

    In this study, theoretical analysis and finite element analysis of the behavior of membrane (such as resonance frequency, membrane deflection, collapse deflection and collapse voltage) in the capacitive micromachined ultrasonic transducer (cMUT) were performed. The design parameters of the cMUT were estimated and are the dimension and thickness of membrane, thickness of sacrificial layer, thickness and size of electrode, size of active element and so on. The resonance frequency of the membrane increased as the thickness of the membrane increased but decreased as the diameter of the membrane increased. The deflection of the membrane increased as d-c bias voltage increased. The collapse voltage of the membrane was predicted.

  19. Capacitive Micromachined Ultrasonic Transducer Arrays for Integrated Diagnostic/Therapeutic Catheters

    Science.gov (United States)

    Wong, Serena H.; Wygant, Ira O.; Yeh, David T.; Zhuang, Xuefeng; Bayram, Baris; Kupnik, Mario; Oralkan, Omer; Ergun, A. Sanli; Yaralioglu, Goksen G.; Khuri-Yakub, Butrus T.

    2006-05-01

    In recent years, medical procedures have become increasingly non-invasive. These include endoscopic procedures and intracardiac interventions (e.g., pulmonary vein isolation for treatment of atrial fibrillation and plaque ablation for treatment of arteriosclerosis). However, current tools suffer from poor visualization and difficult coordination of multiple therapeutic and imaging devices. Dual-mode (imaging and therapeutic) ultrasound arrays provide a solution to these challenges. A dual-mode transducer can provide focused, noncontact ultrasound suitable for therapy and can be used to provide high quality real-time images for navigation and monitoring of the procedure. In the last decade, capacitive micromachined ultrasonic transducers (CMUTs), have become an attractive option for ultrasonic imaging systems due to their fabrication flexibility, improved bandwidth, and integration with electronics. The CMUT's potential in therapeutic applications has also been demonstrated by surface output pressures as high as 1MPa peak to peak and continuous wave (CW) operation. This paper reviews existing interventional CMUT arrays, demonstrates the feasibility of CMUTs for high intensity focused ultrasound (HIFU), and presents a design for the next-generation CMUTs for integrated imaging and HIFU endoscopic catheters.

  20. Two Capacitive Micro-Machined Ultrasonic Transducers for Wind Speed Measurement.

    Science.gov (United States)

    Bui, Gia Thinh; Jiang, Yu-Tsung; Pang, Da-Chen

    2016-01-01

    This paper presents a new wind speed measurement method using a single capacitive micro-machined ultrasonic transducer (CMUT). The CMUT was arranged perpendicular to the direction of the wind flow, and a reflector was set up a short distance away, facing the CMUT. To reduce the size, weight, cost, and power consumption of conventional ultrasonic anemometers this study proposes two CMUT designs for the measurement of wind speed using either the amplitude of the signal or the time of flight (TOF). Each CMUT with a double array element design can transmit and receive signals in five different operation modes. Experiments showed that the two CMUT designs utilizing the TOF were better than those utilizing the amplitude of the signal for wind speed measurements ranging from 1 m/s to 10 m/s, providing a measurement error of less than 0.2 m/s. These results indicate that the sensitivity of the TOF is independent of the five operation modes. PMID:27271625

  1. Two Capacitive Micro-Machined Ultrasonic Transducers for Wind Speed Measurement

    Science.gov (United States)

    Bui, Gia Thinh; Jiang, Yu-Tsung; Pang, Da-Chen

    2016-01-01

    This paper presents a new wind speed measurement method using a single capacitive micro-machined ultrasonic transducer (CMUT). The CMUT was arranged perpendicular to the direction of the wind flow, and a reflector was set up a short distance away, facing the CMUT. To reduce the size, weight, cost, and power consumption of conventional ultrasonic anemometers this study proposes two CMUT designs for the measurement of wind speed using either the amplitude of the signal or the time of flight (TOF). Each CMUT with a double array element design can transmit and receive signals in five different operation modes. Experiments showed that the two CMUT designs utilizing the TOF were better than those utilizing the amplitude of the signal for wind speed measurements ranging from 1 m/s to 10 m/s, providing a measurement error of less than 0.2 m/s. These results indicate that the sensitivity of the TOF is independent of the five operation modes. PMID:27271625

  2. Capacitive micromachined ultrasonic transducer for ultra-low pressure measurement: Theoretical study

    Science.gov (United States)

    Li, Zhikang; Zhao, Libo; Jiang, Zhuangde; Akhbari, Sina; Ding, Jianjun; Zhao, Yihe; Zhao, Yulong; Lin, Liwei

    2015-12-01

    Ultra-low pressure measurement is necessary in many areas, such as high-vacuum environment monitoring, process control and biomedical applications. This paper presents a novel approach for ultra-low pressure measurement where capacitive micromachined ultrasonic transducers (CMUTs) are used as the sensing elements. The working principle is based on the resonant frequency shift of the membrane under the applied pressure. The membranes of the biased CMUTs can produce a larger resonant frequency shift than the diaphragms with no DC bias in the state-of-the-art resonant pressure sensors, which contributes to pressure sensitivity improvement. The theoretical analysis and finite element method (FEM) simulation were employed to study the relationship between the resonant frequency and the pressure. The results demonstrated excellent capability of the CMUTs for ultra-low pressure measurement. It is shown that the resonant frequency of the CMUT varies linearly with the applied pressure. A sensitivity of more than 6.33 ppm/Pa (68 kHz/kPa) was obtained within a pressure range of 0 to 100 Pa when the CMUTs were biased at a DC voltage of 90% of the collapse voltage. It was also demonstrated that the pressure sensitivity can be adjusted by the DC bias voltage. In addition, the effects of air damping and ambient temperature on the resonant frequency were also studied. The effect of air damping is negligible for the pressures below 1000 Pa. To eliminate the temperature effect on the resonant frequency, a temperature compensating method was proposed.

  3. Radiation impedance study of a capacitive micromachined ultrasonic transducer by finite element analysis.

    Science.gov (United States)

    Bayram, Baris

    2015-08-01

    In this study, radiation impedance of a capacitive micromachined ultrasonic transducer composed of square-shaped membranes arranged in m × m configuration (m = 1 - 5) is investigated using finite element analysis (FEA) of a commercially available software package(ANSYS). Radiation impedance is calculated for immersed membranes operating in conventional and collapse modes. Individual membrane response within the multi-membrane configuration is analyzed, and excited modes and their effects on radiation impedance and the pressure spectra are reported. This FEA provides an accurate behavior of the acoustic coupling of a thin membrane in a multi-membrane configuration, and extends above the anti-resonance frequency. The first resonance frequency of the membrane is excited for m × m (m ≥ 3) configuration in conventional mode and for m × m (m ≥ 2) configuration in collapse mode. Therefore, this frequency is determined to be responsible for the adverse effects observed in radiation impedance and pressure spectrum. A membrane configuration, which is missing the central membrane from the full m × m configuration is proposed, and is investigated with the FEA. This study is beneficial for the design of precise transducers suited for biomedical applications. PMID:26328680

  4. Capacitive micromachined ultrasonic transducer for ultra-low pressure measurement: Theoretical study

    Directory of Open Access Journals (Sweden)

    Zhikang Li

    2015-12-01

    Full Text Available Ultra-low pressure measurement is necessary in many areas, such as high-vacuum environment monitoring, process control and biomedical applications. This paper presents a novel approach for ultra-low pressure measurement where capacitive micromachined ultrasonic transducers (CMUTs are used as the sensing elements. The working principle is based on the resonant frequency shift of the membrane under the applied pressure. The membranes of the biased CMUTs can produce a larger resonant frequency shift than the diaphragms with no DC bias in the state-of-the-art resonant pressure sensors, which contributes to pressure sensitivity improvement. The theoretical analysis and finite element method (FEM simulation were employed to study the relationship between the resonant frequency and the pressure. The results demonstrated excellent capability of the CMUTs for ultra-low pressure measurement. It is shown that the resonant frequency of the CMUT varies linearly with the applied pressure. A sensitivity of more than 6.33 ppm/Pa (68 kHz/kPa was obtained within a pressure range of 0 to 100 Pa when the CMUTs were biased at a DC voltage of 90% of the collapse voltage. It was also demonstrated that the pressure sensitivity can be adjusted by the DC bias voltage. In addition, the effects of air damping and ambient temperature on the resonant frequency were also studied. The effect of air damping is negligible for the pressures below 1000 Pa. To eliminate the temperature effect on the resonant frequency, a temperature compensating method was proposed.

  5. Integration of Capacitive Micromachined Ultrasound Transducers to Microfluidic Devices

    KAUST Repository

    Viržonis, Darius

    2013-10-22

    The design and manufacturing flexibility of capacitive micromachined ultrasound transducers (CMUT) makes them attractive option for integration with microfluidic devices both for sensing and fluid manipulation. CMUT concept is introduced here by presentin

  6. Piezoelectric micromachined ultrasonic transducers for fingerprint sensing

    Science.gov (United States)

    Lu, Yipeng

    Fingerprint identification is the most prevalent biometric technology due to its uniqueness, universality and convenience. Over the past two decades, a variety of physical mechanisms have been exploited to capture an electronic image of a human fingerprint. Among these, capacitive fingerprint sensors are the ones most widely used in consumer electronics because they are fabricated using conventional complementary metal oxide semiconductor (CMOS) integrated circuit technology. However, capacitive fingerprint sensors are extremely sensitive to finger contamination and moisture. This thesis will introduce an ultrasonic fingerprint sensor using a PMUT array, which offers a potential solution to this problem. In addition, it has the potential to increase security, as it allows images to be collected at various depths beneath the epidermis, providing images of the sub-surface dermis layer and blood vessels. Firstly, PMUT sensitivity is maximized by optimizing the layer stack and electrode design, and the coupling coefficient is doubled via series transduction. Moreover, a broadband PMUT with 97% fractional bandwidth is achieved by utilizing a thinner structure excited at two adjacent mechanical vibration modes with overlapping bandwidth. In addition, we proposed waveguide PMUTs, which function to direct acoustic waves, confine acoustic energy, and provide mechanical protection for the PMUT array. Furthermore, PMUT arrays were fabricated with different processes to form the membrane, including front-side etching with a patterned sacrificial layer, front-side etching with additional anchor, cavity SOI wafers and eutectic bonding. Additionally, eutectic bonding allows the PMUT to be integrated with CMOS circuits. PMUTs were characterized in the mechanical, electrical and acoustic domains. Using transmit beamforming, a narrow acoustic beam was achieved, and high-resolution (sub-100 microm) and short-range (~1 mm) pulse-echo ultrasonic imaging was demonstrated using a steel

  7. Finite element analysis of underwater capacitor micromachined ultrasonic transducers.

    Science.gov (United States)

    Roh, Yongrae; Khuri-Yakub, Butrus T

    2002-03-01

    A simple electro-mechanical equivalent circuit model is used to predict the behavior of capacitive micromachined ultrasonic transducers (cMUT). Most often, cMUTs are made in silicon and glass plates that are in the 0.5 mm to 1 mm range in thickness. The equivalent circuit model of the cMUT lacks important features such as coupling to the substrate and the ability to predict cross-talk between elements of an array of transducers. To overcome these deficiencies, a flnite element model of the cMUT is constructed using the commercial code ANSYS. Calculation results of the complex load impedance seen by single capacitor cells are presented, then followed by a calculation of the plane wave real load impedance seen by a parallel combination of many cells that are used to make a transducer. Cross-talk between 1-D array elements is found to be due to two main sources: coupling through a Stoneley wave propagating at the transducer-water interface and coupling through Lamb waves propagating in the substrate. To reduce the cross-talk level, the effect of structural variations of the substrate are investigated, which includes a change of its thickness and etched trenches or polymer walls between array elements. PMID:12322877

  8. Tool wear studies in fabrication of microchannels in ultrasonic micromachining.

    Science.gov (United States)

    Cheema, Manjot S; Dvivedi, Akshay; Sharma, Apurbba K

    2015-03-01

    Form accuracy of a machined component is one of the performance indicators of a machining process. Ultrasonic micromachining is one such process in which the form accuracy of the micromachined component significantly depends upon the form stability of tool. Unlike macromachining, a very small amount of tool wear in micromachining could lead to considerable changes in the form accuracy of the machined component. Appropriate selection of tool material is essential to overcome this problem. The present study discusses the effect of tool material, abrasive size and step feed in fabrication of microchannels by ultrasonic machining on borosilicate glass. Development of microchannels using ultrasonic micromachining were rarely reported. It was observed that tungsten carbide tool provided a better form accuracy in comparison to the microchannel machined by stainless steel tool. The tool wear mechanism in both materials is proposed by considering scanning electron micrographs of the tool as evidence. A one factor at a time approach was used to study the effect of various process parameters. PMID:25465965

  9. Resonant gravimetric immunosensing based on capacitive micromachined ultrasound transducers

    KAUST Repository

    Viržonis, Darius

    2014-04-08

    High-frequency (40 MHz) and low-frequency (7 MHz) capacitive micromachined ultrasound transducers (CMUT) were fabricated and tested for use in gravimetric detection of biomolecules. The low-frequency CMUT sensors have a gold-coated surface, while the high-frequency sensors have a silicon nitride surface. Both surfaces were functionalized with bovine leukemia virus antigen gp51 acting as the antigen. On addition of an a specific antibody labeled with horseradish peroxidase (HRP), the antigen/antibody complex is formed on the surface and quantified by HRP-catalyzed oxidation of tetramethylbenzidine. It has been found that a considerably smaller quantity of immuno complex is formed on the high frequency sensor surface. In parallel, the loading of the surface of the CMUT was determined via resonance frequency and electromechanical resistance readings. Following the formation of the immuno complexes, the resonance frequencies of the low-frequency and high-frequency sensors decrease by up to 420 and 440 kHz, respectively. Finite element analysis reveals that the loading of the (gold-coated) low frequency sensors is several times larger than that on high frequency sensors. The formation of the protein film with pronounced elasticity and stress on the gold surface case is discussed. We also discuss the adoption of this method for the detection of DNA using a hybridization assay following polymerase chain reaction.

  10. Resonant gravimetric immuno sensing based on capacitive micromachined ultrasound transducers

    International Nuclear Information System (INIS)

    High-frequency (40 MHz) and low-frequency (7 MHz) capacitive micromachined ultrasound transducers (CMUT) were fabricated and tested for use in gravimetric detection of biomolecules. The low-frequency CMUT sensors have a gold-coated surface, while the high-frequency sensors have a silicon nitride surface. Both surfaces were functionalized with bovine leukemia virus antigen gp51 acting as the antigen. On addition of an a specific antibody labeled with horseradish peroxidase (HRP), the antigen/antibody complex is formed on the surface and quantified by HRP-catalyzed oxidation of tetramethylbenzidine. It has been found that a considerably smaller quantity of immuno complex is formed on the high frequency sensor surface. In parallel, the loading of the surface of the CMUT was determined via resonance frequency and electromechanical resistance readings. Following the formation of the immuno complexes, the resonance frequencies of the low-frequency and high-frequency sensors decrease by up to 420 and 440 kHz, respectively. Finite element analysis reveals that the loading of the (gold-coated) low frequency sensors is several times larger than that on high frequency sensors. The formation of the protein film with pronounced elasticity and stress on the gold surface case is discussed. We also discuss the adoption of this method for the detection of DNA using a hybridization assay following polymerase chain reaction. (author)

  11. A surface-micromachined capacitive microphone with improved sensitivity

    International Nuclear Information System (INIS)

    We present a surface-micromachined capacitive microphone with a membrane center hole and back-plate supports. The proposed membrane center hole reduces air damping at the center of the membrane and increases the sensitivity and frequency response. The back-plate supports allow for a deep back-chamber and prevent deformation of the back-plate. The proposed microelectromechanical-system (MEMS) microphone is fabricated using fully CMOS-compatible processes. The fabricated MEMS microphone has a membrane 500 µm in diameter and a center hole 30 µm in diameter. A deep back-chamber with a depth of 100 µm is formed by the back-plate supporting structures. During fabrication, the residual stress of the membrane is minimized using PECVD silicon nitride inserted in the metal membrane. The measured residual stress of the sensing membrane is 14.8 MPa. Acoustic measurements show that the sensitivity of the microphone is −49.1 dBV Pa−1 @1 kHz at a 12 V dc bias voltage, which is in good agreement with the calculated value. (paper)

  12. Dynamic mechanism and its modelling of micromachined electrostatic ultrasonic transducers

    Institute of Scientific and Technical Information of China (English)

    葛立峰

    1999-01-01

    A tensile-plate-on-air-spring model (or called TDK model for short) for micromachined electrostatic ultrasonic transducers has been developed based on a thorough investigation of their dynamic mechanism. The mechanical stiffness effects caused by the compressibility of air gaps, bending stiffness of the diaphragm and in-plane tension applied to the diaphragm, together with an electrostatic negative stiffness effect are included completely in the model. Desired particular fundamental frequency and bandwidth can be obtained by only properly tailoring the geometry, dimensions and materials of transducers according to the model, which provides thereby a reliable theoretical basis for the understanding and optimised design of such transducers.

  13. Equivalent Circuit Models for Large Arrays of Curved and Flat Piezoelectric Micromachined Ultrasonic Transducers.

    Science.gov (United States)

    Akhbari, Sina; Sammoura, Firas; Lin, Liwei

    2016-03-01

    Equivalent circuit models of large arrays of curved (spherical shape) and flat piezoelectric micromachined ultrasonic transducers (pMUTs) have been developed for complex pMUT arrays design and analysis. The exact solutions for circuit parameters in the electromechanical domain, such as mechanical admittance, input electrical impedance, and electromechanical transformer ratio, were analytically derived. By utilizing the array solution methods previously established for the thickness-mode piezoelectric devices and capacitive micromachined ultrasonic transducers (cMUTs), the single pMUT circuit model can be extended to models for array structures. The array model includes both the self- and mutual-acoustic radiation impedances of individual transducers in the acoustic medium. Volumetric displacement, induced piezoelectric current, and pressure field can be derived with respect to the input voltage matrix, material, and geometrical properties of each individual transducer and the array structure. As such, the analytical models presented here can be used as a guideline for analyses and design evaluations of large arrays of curved and flat pMUTs efficiently and can be further generalized to evaluate other pMUT architectures in the form of single devices or arrays. PMID:26863658

  14. Micromachined Integrated Transducers for Ultrasound Imaging

    DEFF Research Database (Denmark)

    la Cour, Mette Funding

    The purpose of this project is to develop capacitive micromachined ultrasonic transducers (CMUTs) for medical imaging. Medical ultrasound transducers used today are fabricated using piezoelectric materials and bulk processing. To fabricate transducers capable of delivering a higher imaging...

  15. Touch mode micromachined capacitive pressure sensor with signal conditioning electronics

    DEFF Research Database (Denmark)

    Fragiacomo, Giulio; Eriksen, Gert F.; Christensen, Carsten;

    2010-01-01

    In the last decades, pressure sensors have been one of the greatest successes of the MEMS industry. Many companies are using them in a variety of applications from the automotive to the environmental field. Currently piezoresistive pressure sensors are the most developed, and a well established...... technology to design and fabricate these sensors has been implemented. Capacitive pressure sensing, on the other hand, is still an open and really promising field. Results Capacitive microsensors were designed and fabricated (Fig. 1) and an analytical model for touch mode regime, which fitted accurately the...... is therefore to develop new technologies based on capacitive sensing to be able to fulfil future requirements in this field....

  16. Waveguide piezoelectric micromachined ultrasonic transducer array for short-range pulse-echo imaging

    Science.gov (United States)

    Lu, Y.; Tang, H.; Wang, Q.; Fung, S.; Tsai, J. M.; Daneman, M.; Boser, B. E.; Horsley, D. A.

    2015-05-01

    This paper presents an 8 × 24 element, 100 μm-pitch, 20 MHz ultrasound imager based on a piezoelectric micromachined ultrasonic transducer (PMUT) array having integrated acoustic waveguides. The 70 μm diameter, 220 μm long waveguides function both to direct acoustic waves and to confine acoustic energy, and also to provide mechanical protection for the PMUT array used for surface-imaging applications such as an ultrasonic fingerprint sensor. The imager consists of a PMUT array bonded with a CMOS ASIC using wafer-level conductive eutectic bonding. This construction allows each PMUT in the array to have a dedicated front-end receive amplifier, which together with on-chip analog multiplexing enables individual pixel read-out with high signal-to-noise ratio through minimized parasitic capacitance between the PMUT and the front-end amplifier. Finite element method simulations demonstrate that the waveguides preserve the pressure amplitude of acoustic pulses over distances of 600 μm. Moreover, the waveguide design demonstrated here enables pixel-by-pixel readout of the ultrasound image due to improved directivity of the PMUT by directing acoustic waves and creating a pressure field with greater spatial uniformity at the end of the waveguide. Pulse-echo imaging experiments conducted using a one-dimensional steel grating demonstrate the array's ability to form a two-dimensional image of a target.

  17. A top-crossover-to-bottom addressed segmented annular array using piezoelectric micromachined ultrasonic transducers

    Science.gov (United States)

    Jung, Joontaek; Lee, Wonjun; Kang, Woojin; Hong, Hyeryung; Yuen Song, Hi; Oh, Inn-yeal; Park, Chul Soon; Choi, Hongsoo

    2015-11-01

    We design and fabricate segmented annular arrays (SAAs) using piezoelectric micromachined ultrasonic transducers (pMUTs) to demonstrate the feasibility of acoustic focusing of ultrasound. The fabricated SAAs have 25 concentric top-electrode signal lines and eight bottom-electrodes for grounding to enable electronic steering of selectively grouped ultrasonic transducers from 2393 pMUT elements. Each element in the array is connected by top-crossover-to-bottom metal bridges, which reduce the parasitic capacitance. Circular-shaped pMUT elements, 120 μm in diameter, are fabricated using 1 μm-thick sol-gel lead zirconate titanate on a silicon wafer. To utilize the high-density pMUT array, a deep reactive ion etching process is used for anisotropic silicon etching to realize the transducer membranes. The resonant frequency and effective coupling coefficient of the elements, measured with an impedance analyzer, yields 1.517 MHz and 1.29%, respectively, in air. The SAAs using pMUTs are packaged on a printed circuit board and coated with parylene C for acoustic intensity measurements in water. The ultrasound generated by each segmented array is focused on a selected point in space. When a 5 Vpp, 1.5 MHz square wave is applied, the maximum spatial peak temporal average intensity ({{I}\\text{spta}} ) is found to be 79 mW cm-2 5 mm from the SAAs’ surface without beamforming. The beam widths (-3 dB) of ultrasonic radiation patterns in the elevation and azimuth directions are recorded as 3 and 3.4 mm, respectively. The results successfully show the feasibility of focusing ultrasound on a small area with SAAs using pMUTs.

  18. Micromachined capacitive pressure sensor with signal conditioning electronics

    DEFF Research Database (Denmark)

    Fragiacomo, Giulio

    possible solution in many cases where, for example, the dimensions of the sensing element is the limiting factor. Furthermore, MEMS can significantly reduce costs and power consumption being the best candidate for consumer electronics such as mobile phones and cameras, or for the automotive industry where...... a great deal of sensors are used. Pressure sensors are among the most successful MEMS and are used in a huge variety of applications. In this project an absolute capacitive pressure sensor has been developed with the aim to integrate it in pump control systems to improve the efficiency of the pump....... This demonstrator has been characterized and presented at Grundfos Direct Sensors A/S and constitute the preliminary work for a new product which is intended target the low power or wireless pressure sensor for harsh environment market....

  19. Highly sensitive micromachined capacitive pressure sensor with reduced hysteresis and low parasitic capacitance

    DEFF Research Database (Denmark)

    Pedersen, Thomas; Fragiacomo, Giulio; Hansen, Ole;

    2009-01-01

    This paper describes the design and fabrication of a capacitive pressure sensor that has a large capacitance signal and a high sensitivity of 76 pF/bar in touch mode operation. Due to the large signal, problems with parasitic capacitances are avoided and hence it is possible to integrate the sensor...... with a discrete components electronics circuit for signal conditioning. Using an AC bridge electronics circuit a resolution of 8 mV/mbar is achieved. The large signal is obtained due to a novel membrane structure utilizing closely packed hexagonal elements. The sensor is fabricated in a process based...

  20. Simulating Capacitive Micromachined Ultrasonic Transducers (CMUTs) using Field II

    DEFF Research Database (Denmark)

    Bæk, David; Oralkan, Omer; Kupnik, Mario;

    2010-01-01

    Field II has been a recognized simulation tool for piezoceramic medical transducer arrays for more than a decade. The program has its strength in doing fast computations of the spatial impulse response (SIR) from array elements by dividing the elements into smaller mathematical elements (ME)s from...... which it calculates the SIR responses. The program features predefined models for classical transducer geometries, but currently none for the fast advancing CMUTs. This work addresses the assumptions required for modeling CMUTs with Field II. It is shown that rectangular array elements, populated with...... cells, can be well approximated by neglecting the cells. Further, it is demonstrated that scaling of the SIR translates into better computational efficiency....

  1. Fabrication of a Micromachined Capacitive Switch Using the CMOS-MEMS Technology

    Directory of Open Access Journals (Sweden)

    Cheng-Yang Lin

    2015-11-01

    Full Text Available The study investigates the design and fabrication of a micromachined radio frequency (RF capacitive switch using the complementary metal oxide semiconductor-microelectromechanical system (CMOS-MEMS technology. The structure of the micromachined switch is composed of a membrane, eight springs, four inductors, and coplanar waveguide (CPW lines. In order to reduce the actuation voltage of the switch, the springs are designed as low stiffness. The finite element method (FEM software CoventorWare is used to simulate the actuation voltage and displacement of the switch. The micromachined switch needs a post-CMOS process to release the springs and membrane. A wet etching is employed to etch the sacrificial silicon dioxide layer, and to release the membrane and springs of the switch. Experiments show that the pull-in voltage of the switch is 12 V. The switch has an insertion loss of 0.8 dB at 36 GHz and an isolation of 19 dB at 36 GHz.

  2. Micromachining techniques in developing high-frequency piezoelectric composite ultrasonic array transducers.

    Science.gov (United States)

    Liu, Changgeng; Djuth, Frank T; Zhou, Qifa; Shung, K Kirk

    2013-12-01

    Several micromachining techniques for the fabrication of high-frequency piezoelectric composite ultrasonic array transducers are described in this paper. A variety of different techniques are used in patterning the active piezoelectric material, attaching backing material to the transducer, and assembling an electronic interconnection board for transmission and reception from the array. To establish the feasibility of the process flow, a hybrid test ultrasound array transducer consisting of a 2-D array having an 8 × 8 element pattern and a 5-element annular array was designed, fabricated, and assessed. The arrays are designed for a center frequency of ~60 MHz. The 2-D array elements are 105 × 105 μm in size with 5-μm kerfs between elements. The annular array surrounds the square 2-D array and provides the option of transmitting from the annular array and receiving with the 2-D array. Each annular array element has an area of 0.71 mm(2) with a 16-μm kerf between elements. The active piezoelectric material is (1 - x) Pb(Mg1/3Nb2/3)O3-xPbTiO3 (PMN-PT)/epoxy 1-3 composite with a PMN-PT pillar lateral dimension of 8 μm and an average gap width of ~4 μm, which was produced by deep reactive ion etching (DRIE) dry etching techniques. A novel electric interconnection strategy for high-density, small-size array elements was proposed. After assembly, the array transducer was tested and characterized. The capacitance, pulse-echo responses, and crosstalk were measured for each array element. The desired center frequency of ~60 MHz was achieved and the -6-dB bandwidth of the received signal was ~50%. At the center frequency, the crosstalk between adjacent 2-D array elements was about -33 dB. The techniques described herein can be used to build larger arrays containing smaller elements. PMID:24297027

  3. Micromachining.

    Science.gov (United States)

    Park, Bob; Lamson, Bob; Lowell, Dave

    2002-03-01

    Components and features can be made in a number of ways. This article describes the different micromachining processes and what they can achieve in terms of precision, repeatability and cost savings. PMID:11984992

  4. Greenhouse Gas Molecule CO2 Detection Using a Capacitive Micromachined Ultrasound Transducer.

    Science.gov (United States)

    Barauskas, Dovydas; Pelenis, Donatas; Virzonis, Darius; Baltrus, John P; Baltrusaitis, Jonas

    2016-07-01

    We manufactured and tested a capacitive micromachined ultrasound transducer (CMUT)-based sensor for CO2 detection at environmentally relevant concentrations using polyethylenimine as a CO2 binding material. The assembly of a sensing chip was 10 × 20 mm, and up to 5 gases can potentially be detected simultaneously using a masking technique and different sensing materials. The limit of detection was calculated to be 0.033 CO2 vol % while the limit of quantification was calculated to be 0.102%. The sensor exhibited a linear response between 0.06% and 0.30% CO2 while concentrations close to those in flue gas can also be measured using dilution with inert gas. PMID:27321769

  5. Design, simulation and testing of capacitive micromachined ultrasound transducer-based phospholipidic biosensor elements

    International Nuclear Information System (INIS)

    In this study we present theoretical proof of the principle of using interdigital capacitive micromachined ultrasound transducers (CMUT IDTs) for the detection of phospholipid membrane elasticity. Proof of principle was needed to find out whether the new type of microelectromechanical sensors of the toxins incorporated with the lipid membranes was feasible. CMUT IDTs for 10 MHz operation in water, with 146 µm spaced double fingers were designed and fabricated using the surface micromachining technique. Fabricated CMUTs were tested for their resonance in air and for Scholte-type wave transmission in deionized water and isopropanol solutions containing 0%, 10% and 20% water. The amplitude and phase velocity of the excited and received Scholte waves were measured in a 200 µm height microchannel, capped with a thick layer of soft polymer, which suppressed the production of non-informative guided waves. It was determined that the average sensitivity of Scholte wave phase velocity within the given range of solution concentrations is 2.9 m s−1 per one percent. Experimental data were also used to verify the adequacy of the finite element model, which was found to be suitable for reliable prediction of the phospholipid membrane elasticity impact on the Scholte wave phase velocity or the resonance frequency in the present IDT structure. It was determined that for the analyzed conditions (the elasticity of simulated phospholipid membrane changed from 1 to 5 GPa) the sensitivity of the measurement channel is expected to be no worse than 2 kHz GPa−1 in terms of the Scholte wave and CMUT IDT resonance frequency. This leads to a positive conclusion on the feasibility of the new sensor type. (paper)

  6. Capacitive Ultrasonic Transducer Development for Acoustic Anemometry on Mars

    Science.gov (United States)

    Leonard-Pugh, Eurion; Wilson, C.; Calcutt, S.; Davis, L.

    2012-10-01

    Previous Mars missions have used either mechanical or thermal anemometry techniques. The moving parts of mechanical anemometers are prone to damage during launch and landing and their inertia makes them unsuited for turbulence studies. Thermal anemometers have been used successfully on Mars but are difficult to calibrate and susceptible to varying ambient temperatures. In ultrasonic anemometry, wind speed and sound speed are calculated from two-way time-of-flight measurements between pairs of transducers; three pairs of transducers are used to return a 3-D wind vector. These high-frequency measurements are highly reliable and immune from drift. Piezo-electric ultrasonic anemometers are widely used on Earth due to their full-range accuracy and high measurement frequency. However these transducers have high acoustic impedances and would not work on Mars. We are developing low-mass capacitive ultrasonic transducers for Mars missions which have significantly lower acoustic impedances and would therefore have a much stronger coupling to the Martian atmosphere. These transducers consist of a metallised polymer film pulled taught against a machined metal backplane. The film is drawn towards the backplane by a DC bias voltage. A varying signal is used on top of the DC bias to oscillate the film; generating acoustic waves. This poster will look at the operation of such sensors and the developments necessary to operate the devices under Martian conditions. Transducer performance is determined primarily by two elements; the front film and the backplane. The sensitivity of the transducer is affected by the thickness of the front film; as well as the diameter, curvature and roughness of the metal backplane. We present data on the performance of the sensors and instrument design considerations including signal shapes and transducer arrangements.

  7. Droplet formation and ejection from a micromachined ultrasonic droplet generator: Visualization and scaling

    Science.gov (United States)

    Meacham, J. M.; Varady, M. J.; Degertekin, F. L.; Fedorov, A. G.

    2005-10-01

    Visualization and scaling of drop-on-demand and continuous-jet fluid atomization of water are presented to elucidate the fluid physics of the ejection process and characterize the modes of operation of a novel micromachined ultrasonic droplet generator. The device comprises a fluid reservoir that is formed between a bulk ceramic piezoelectric transducer and an array of liquid horn structures wet etched into (100) silicon. At resonance, the transducer generates a standing ultrasonic pressure wave within the cavity and the wave is focused at the tip of the nozzle by the horn structure. Device operation has been demonstrated by water droplet ejection from 5to10μm orifices at multiple resonant frequencies between 1 and 5MHz. The intimate interactions between focused ultrasonic pressure waves and capillary waves formed at the liquid-air interface located at the nozzle tip are found to govern the ejection dynamics, leading to different ejection modalities ranging from individual droplets to continuous jet. Specifically, we report the results of high-resolution stroboscopic optical imaging of the liquid-air interface evolution during acoustic pumping to elucidate the role of capillary waves in the droplet formation and ejection process. A basic understanding of the governing physics gained through careful visualization and scaling forms the basis for development of improved theoretical models for the droplet formation and ejection processes by accounting for key fluid mechanical features of the phenomena.

  8. Ultrasonic fingerprint sensor using a piezoelectric micromachined ultrasonic transducer array integrated with complementary metal oxide semiconductor electronics

    International Nuclear Information System (INIS)

    This paper presents an ultrasonic fingerprint sensor based on a 24 × 8 array of 22 MHz piezoelectric micromachined ultrasonic transducers (PMUTs) with 100 μm pitch, fully integrated with 180 nm complementary metal oxide semiconductor (CMOS) circuitry through eutectic wafer bonding. Each PMUT is directly bonded to a dedicated CMOS receive amplifier, minimizing electrical parasitics and eliminating the need for through-silicon vias. The array frequency response and vibration mode-shape were characterized using laser Doppler vibrometry and verified via finite element method simulation. The array's acoustic output was measured using a hydrophone to be ∼14 kPa with a 28 V input, in reasonable agreement with predication from analytical calculation. Pulse-echo imaging of a 1D steel grating is demonstrated using electronic scanning of a 20 × 8 sub-array, resulting in 300 mV maximum received amplitude and 5:1 contrast ratio. Because the small size of this array limits the maximum image size, mechanical scanning was used to image a 2D polydimethylsiloxane fingerprint phantom (10 mm × 8 mm) at a 1.2 mm distance from the array

  9. Ultrasonic fingerprint sensor using a piezoelectric micromachined ultrasonic transducer array integrated with complementary metal oxide semiconductor electronics

    Energy Technology Data Exchange (ETDEWEB)

    Lu, Y.; Fung, S.; Wang, Q.; Horsley, D. A. [Berkeley Sensor and Actuator Center, University of California, Davis, 1 Shields Avenue, Davis, California 95616 (United States); Tang, H.; Boser, B. E. [Berkeley Sensor and Actuator Center, University of California, Berkeley, California 94720 (United States); Tsai, J. M.; Daneman, M. [InvenSense, Inc., 1745 Technology Drive, San Jose, California 95110 (United States)

    2015-06-29

    This paper presents an ultrasonic fingerprint sensor based on a 24 × 8 array of 22 MHz piezoelectric micromachined ultrasonic transducers (PMUTs) with 100 μm pitch, fully integrated with 180 nm complementary metal oxide semiconductor (CMOS) circuitry through eutectic wafer bonding. Each PMUT is directly bonded to a dedicated CMOS receive amplifier, minimizing electrical parasitics and eliminating the need for through-silicon vias. The array frequency response and vibration mode-shape were characterized using laser Doppler vibrometry and verified via finite element method simulation. The array's acoustic output was measured using a hydrophone to be ∼14 kPa with a 28 V input, in reasonable agreement with predication from analytical calculation. Pulse-echo imaging of a 1D steel grating is demonstrated using electronic scanning of a 20 × 8 sub-array, resulting in 300 mV maximum received amplitude and 5:1 contrast ratio. Because the small size of this array limits the maximum image size, mechanical scanning was used to image a 2D polydimethylsiloxane fingerprint phantom (10 mm × 8 mm) at a 1.2 mm distance from the array.

  10. Fabrication and characterization of a smart epitaxial piezoelectric micromachined ultrasonic transducer

    Energy Technology Data Exchange (ETDEWEB)

    Ozaki, Katsuya [Department of Electrical and Electronic Information Engg, Toyohashi University of Technology, Toyohashi, Aichi 441-8580 (Japan); Matin, Abdul, E-mail: matin.md.a@gmail.com [Department of Glass and Ceramic Engineering, Bangladesh University of Engg and Tech (BUET), Dhaka 1000 (Bangladesh); Numata, Yasuyuki [Department of Electrical and Electronic Information Engg, Toyohashi University of Technology, Toyohashi, Aichi 441-8580 (Japan); Akai, Daisuke [Electronics-Inspired Interdisciplinary Research Institute (EIIRIS), Toyohashi University of Technology Toyohashi, Toyohahsi, Aichi 441-8580 (Japan); Sawada, Kazuaki; Ishida, Makoto [Department of Electrical and Electronic Information Engg, Toyohashi University of Technology, Toyohashi, Aichi 441-8580 (Japan); Electronics-Inspired Interdisciplinary Research Institute (EIIRIS), Toyohashi University of Technology Toyohashi, Toyohahsi, Aichi 441-8580 (Japan)

    2014-12-15

    Highlights: • Highly [1 1 1] orientated functional PZT(1 1 1) thin film was grown on n-Si(1 1 1)/γ-Al{sub 2}O{sub 3}(1 1 1)/SrRuO{sub 3}(1 1 1). • Device performance of pMUT was studied using both experiment and modeling. • Material anisotropy played a significant role in the shifting of resonant frequency • pMUT shows high sensitivity for the transmission of ultrasonic pulses. • Successful realization of a piezoelectric ultrasonic transducer (pMUT) array. - Abstract: A novel piezoelectric micromachined ultrasonic transducer (pMUT) array was designed and fabricated using epitaxially grown functional Pb(Zr{sub 0.52}Ti{sub 0.48})O{sub 3} (PZT) thin film on Si(1 1 1)/γ-Al{sub 2}O{sub 3}(1 1 1)/SrRuO{sub 3}(1 1 1) substrate for biomedical applications. The crystallographic orientation of PZT film was controlled by the incorporation of epitaxial γ-Al{sub 2}O{sub 3} film on Si substrate. Modal shape of pMUT was analyzed employing advanced 3D finite element modeling taking the crystallographic anisotropy of materials and the properties of immersed medium (air or water) into account. Eigenfrequency with mode shapes has shown to have significant influence on transmitting-receiving characteristics of pMUT. Modal shapes of pMUT were also quantitatively determined using Laser Doppler Vibratometry (LDV). An excellent correlation was obtained between computational and experimental results. A significantly high sensitivity of 3.9 μV/kPa was obtained in an under-water ultrasonic wave transmission experiment conducted using fabricated pMUT as wave transmitter and a commercial transducer as receiver at a fundamental frequency of 1.20 MHz. Advanced FE computation thus serves as a tool to a priori optimize device structure for the successful transmission of ultrasonic waves with sufficient power to generate high resolution 3D imaging.

  11. Nonlinearity analysis of piezoelectric micromachined ultrasonic transducers based on couple stress theory

    Institute of Scientific and Technical Information of China (English)

    Xin Kang; Fu-Jun Yang; Xiao-Yuan He

    2012-01-01

    This paper studies the static deformation behavior of a piezoelectric micromachined ultrasonic transducer (PMUT) actuated by a strong external electric field.The transducer membrane consists of a piezoelectric layer,a passive layer and two electrode layers.The nonlinearities of the piezoelectric layer caused by electrostriction under a strong electric field are analyzed. Because the thickness of the transducer membrane is on the microscale,the size dependence of the deformation behavior is evaluated using the couple stress theory.The results show that the optimal ratio of the top electrode diameter and the membrane diameter is around 0.674.It is also found that this optimal value does not depend on any other parameters if the thicknesses of the two electrodes are negligible compared with those of the piezoelectric and passive layers.In addition,the nonlinearities of the piezoelectric layer will become stronger along with the increase of the electric field,which means that softening of the membrane stiffness occurs when a strong external electric field is applied.Meanwhile,the optimal thickness ratio for the passive layer and the piezoelectric layer is not equal to 1.0 which is usually adopted by previous researchers.Because there exists size dependence of membrane deformation,the optimal value of this thickness ratio needs to be greater than 1.0 on the microscale.

  12. PMN-PT single crystal thick films on silicon substrate for high-frequency micromachined ultrasonic transducers

    Energy Technology Data Exchange (ETDEWEB)

    Peng, J.; Lau, S.T.; Chao, C.; Dai, J.Y.; Chan, H.L.W. [The Hong Kong Polytechnic University, Department of Applied Physics and Materials Research Center, Hong Kong (China); Luo, H.S. [Chinese Academy of Sciences, The State Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Shanghai (China); Zhu, B.P.; Zhou, Q.F.; Shung, K.K. [University of Southern California, Department of Biomedical Engineering and NIH Transducer Resource Center, Los Angeles, CA (United States)

    2010-01-15

    In this work, a novel high-frequency ultrasonic transducer structure is realized by using PMNPT-on-silicon technology and silicon micromachining. To prepare the single crystalline PMNPT-on-silicon wafers, a hybrid processing method involving wafer bonding, mechanical lapping and wet chemical thinning is successfully developed. In the transducer structure, the active element is fixed within the stainless steel needle housing. The measured center frequency and -6 dB bandwidth of the transducer are 35 MHz and 34%, respectively. Owing to the superior electromechanical coupling coefficient (k{sub t}) and high piezoelectric constant (d{sub 33}) of PMNPT film, the transducer shows a good energy conversion performance with a very low insertion loss down to 8.3 dB at the center frequency. (orig.)

  13. Ultrasonic-assisted ac etching of aluminum foils for electrolytic capacitor electrodes with enhanced capacitance

    International Nuclear Information System (INIS)

    ac etching of high-purity aluminum foils in hybrid acids including hydrochloric acid, sulphuric acid and oxalic acid was investigated and the effects of ultrasonic-assisted stirring on the performances of the etched foils were investigated in this work. Scanning electron microscopy (SEM) was used for observation of the etched foils. Compared with the classically used mechanical stirring (magnetic stirring), the assistance of ultrasonic increased the performance of the etched foil. With 20 V forming voltage, the static capacitance and bending strength of the foils etched with ultrasonic stirring reached 76.5 μF cm-2 and 98 times compared with 71.2 μF cm-2 and 85 times respectively for the foils fabricated with magnetic stirring using 100 μm aluminum foils. The performance enhancement with the assistance of ultrasonic is probably due to the cavitation effects which are beneficial for the remove of protective layer and the dispersion effects which reduce concentration polarization in the bulk etchant solutions.

  14. A parallel-architecture parametric equalizer for air-coupled capacitive ultrasonic transducers.

    Science.gov (United States)

    McSweeney, Sean G; Wright, William M D

    2012-01-01

    Parametric equalization is rarely applied to ultrasonic transducer systems, for which it could be used on either the transmitter or the receiver to achieve a desired response. An optimized equalizer with both bump and cut capabilities would be advantageous for ultrasonic systems in applications in which variations in the transducer performance or the properties of the propagating medium produce a less-than-desirable signal. Compensation for non-ideal transducer response could be achieved using equalization on a device-by-device basis. Additionally, calibration of ultrasonic systems in the field could be obtained by offline optimization of equalization coefficients. In this work, a parametric equalizer for ultrasonic applications has been developed using multiple bi-quadratic filter elements arranged in a novel parallel arrangement to increase the flexibility of the equalization. The equalizer was implemented on a programmable system-on-chip (PSOC) using a small number of parallel 4th-order infinite impulse response switchedcapacitor band-pass filters. Because of the interdependency of the required coefficients for the switched capacitors, particle swarm optimization (PSO) was used to determine the optimum values. The response of a through-transmission system using air-coupled capacitive ultrasonic transducers was then equalized to idealized Hamming function or brick-wall frequencydomain responses. In each case, there was excellent agreement between the equalized signals and the theoretical model, and the fidelity of the time-domain response was maintained. The bandwidth and center frequency response of the system were significantly improved. It was also shown that the equalizer could be used on either the transmitter or the receiver, and the system could compensate for the effects of transmitterreceiver misalignment. PMID:22293739

  15. Development of micro capacitive accelerometer for subsurface microseismic measurement; Micromachining ni yoru chika danseiha kenshutsu no tame no silicon yoryogata kasokudo sensor no seisaku

    Energy Technology Data Exchange (ETDEWEB)

    Nishizawa, M.; Niitsuma, H.; Esashi, M. [Tohoku University, Sendai (Japan). Faculty of Engineering

    1997-05-27

    A silicon capacitive accelerometer was fabricated to detect subsurface elastic waves by using micromachining technology. Characteristics required for it call for capability of detecting acceleration with amplitudes from 0.1 to 1 gal and flat amplitude characteristics in frequency bands of 10 Hz to several kHz. For the purpose of measuring transition phenomena, linear phase characteristics in the required bands must be guaranteed, cross sensitivity must be small, and resistance to water, pressure and heat is demanded. Sensitivity of the sensor is determined finally by noise level in a detection circuit. The sensor`s minimum detection capability was 40 mgal in the case of the distance between a weight and an electrode being 3 {mu}m. This specification value is a value realizable by the current micromachining technology. Dimensions for the weight and other members were decided with the natural frequency to make band width 2 kHz set to 4 kHz. Completion of the product has not been achieved yet, however, because of a problem that the weight gets stuck on the electrode plate in anode bonding in the assembly process. 7 refs., 5 figs., 1 tab.

  16. Wideband micromachined microphones with radio frequency detection

    Science.gov (United States)

    Hansen, Sean Thomas

    There are many commercial, scientific, and military applications for miniature wideband acoustic sensors, including monitoring the condition or wear of equipment, collecting scientific data, and identifying and localizing military targets. The application of semiconductor micromachining techniques to sensor fabrication has the potential to transform acoustic sensing with small, reproducible, and inexpensive silicon-based microphones. However, such sensors usually suffer from limited bandwidth and from non-uniformities in their frequency response due to squeeze-film damping effects and narrow air gaps. Furthermore, they may be too fragile to be left unattended in a humid or dusty outdoor environment. Silicon microphones that incorporate capacitive micromachined ultrasonic transducer membranes overcome some of the drawbacks of conventional microphones. These micromachined membranes are small and robust enough to be vacuum-sealed, and can withstand atmospheric pressure and submersion in water. In addition, the membrane mechanical response is flat from dc up to ultrasonic frequencies, resulting in a wideband sensor for accurate spectral analysis of acoustic signals. However, a sensitive detection scheme is necessary to detect the small changes in membrane displacement that result from using smaller, stiffer membranes than do conventional microphones. We propose a radio frequency detection technique, in which the capacitive membranes are incorporated into a transmission line. Variations in membrane capacitance due to impinging sound pressure are sensed through the phase variations of a carrier signal that propagates along the line. This dissertation examines the design, fabrication, modeling, and experimental measurements of wideband micromachined microphones using sealed ultrasonic membranes and RF detection. Measurements of fabricated microphones demonstrate less than 0.5 dB variation in their output responses between 0.1 Hz to 100 kHz under electrostatic actuation of

  17. Fully parameterized model of a voltage-driven capacitive coupled micromachined ohmic contact switch for RF applications

    International Nuclear Information System (INIS)

    A comprehensive and completely parameterized model is proposed to determine the related electrical and mechanical dynamic system response of a voltage-driven capacitive coupled micromechanical switch. As an advantage over existing parameterized models, the model presented in this paper returns within few seconds all relevant system quantities necessary to design the desired switching cycle. Moreover, a sophisticated and detailed guideline is given on how to engineer a MEMS switch. An analytical approach is used throughout the modelling, providing representative coefficients in a set of two coupled time-dependent differential equations. This paper uses an equivalent mass moving along the axis of acceleration and a momentum absorption coefficient. The model describes all the energies transferred: the energy dissipated in the series resistor that models the signal attenuation of the bias line, the energy dissipated in the squeezed film, the stored energy in the series capacitor that represents a fixed separation in the bias line and stops the dc power in the event of a short circuit between the RF and dc path, the energy stored in the spring mechanism, and the energy absorbed by mechanical interaction at the switch contacts. Further, the model determines the electrical power fed back to the bias line. The calculated switching dynamics are confirmed by the electrical characterization of the developed RF switch. The fabricated RF switch performs well, in good agreement with the modelled data, showing a transition time of 7 µs followed by a sequence of bounces. Moreover, the scattering parameters exhibit an isolation in the off-state of >8 dB and an insertion loss in the on-state of <0.6 dB up to frequencies of 50 GHz. The presented model is intended to be integrated into standard circuit simulation software, allowing circuit engineers to design the switch bias line, to minimize induced currents and cross actuation, as well as to find the mechanical structure dimensions

  18. Effect of ultrasonic treatment of activated carbon on capacitive and pseudocapacitive energy storage in electrochemical supercapacitors

    Directory of Open Access Journals (Sweden)

    B.Ya. Venhryn

    2013-10-01

    Full Text Available Purpose: Use of ultrasonic radiation for improving the properties of activated carbon was the aim of this paper. Increase of density of states at Fermi level was the main factor, responsible for working characteristics of electrochemical supercapacitors. Design/methodology/approach: Working parameters of supercapacitors on the base of activated carbon have been studied by means of precisional porometry, small angle X-ray scattering, cyclic voltamerometry, electrochemical impedance spectroscopy and computer simulation methods. Findings: The possibility to effect the interface between activated carbon and electrolyte by means of ultrasonic treatment in cavitation and noncavitation regimes is proved. It is shown that ultrasonic treatment in noncavitation regimes causes the significant increase of density of states at Fermi level that results in better farad-volt dependences. Research limitations/implications: This research is a complete and accomplished work. Practical implications: Modification of electric double layer by meanans in ultrasonic treatment, proposed in this work, could be regarded as effective way to obtaine the advanced electrode materials in devices of energy generation and storage. Originality/value: This work is important for physics, material science and chemistry because it is related with new possibilities to change the mobility of charge carries in electric double layer by means of ultrasonic irradiation.

  19. Micromachined chemical jet dispenser

    Energy Technology Data Exchange (ETDEWEB)

    Swierkowski, S.; Ciarlo, D.

    1996-05-13

    Goal is to develop a multi-channel micromachined chemical fluid jet dispenser that is applicable to prototype tests with biological samples that demonstrate its utility for molecular biology experiments. Objective is to demonstrate a new device capable of ultrasonically ejecting droplets from 10-200 {mu}m diameter capillaries that are arranged in an array that is linear or focused. The device is based on several common fabrication procedures used in MEMS (micro electro mechanical systems) technology: piezoelectric actuators, silicon, etc.

  20. Effect of ultrasonic treatment of activated carbon on capacitive and pseudocapacitive energy storage in electrochemical supercapacitors

    OpenAIRE

    B.Ya. Venhryn; I.I. Grygorchak; Z.A. Stotsko; B.P. Bakhmatyuk; S.I. Mudry; Yu.O. Kulyk

    2013-01-01

    Purpose: Use of ultrasonic radiation for improving the properties of activated carbon was the aim of this paper. Increase of density of states at Fermi level was the main factor, responsible for working characteristics of electrochemical supercapacitors. Design/methodology/approach: Working parameters of supercapacitors on the base of activated carbon have been studied by means of precisional porometry, small angle X-ray scattering, cyclic voltamerometry, electrochemical im...

  1. The effect of ultrasonic and HNO3 treatment of activated carbon from fruit stones on capacitive and pseudocapacitive energy storage in electrochemical supercapacitors.

    Science.gov (United States)

    Venhryn, B Ya; Stotsko, Z A; Grygorchak, I I; Bakhmatyuk, B P; Mudry, S I

    2013-09-01

    The effect of ultrasonic treatment and modification with nitric acid of activated carbon obtained from fruit stones, on the parameters of electric double-layer (EDL) as well as on farad-volt characteristics of its boundary with electrolyte 7.6 m KОН, 4 m KI and 2 m ZnI2 aqueous solutions has been studied by means of precision porometry, cyclic voltamperometry, electrochemical impedance spectroscopy and computer simulation methods. It is shown that HNO3 treatment results in an increase of the electrostatic capacitance up to 202 F/g in 7.6 m KОН-solution as well as pseudocapacitance up to 1250 F/g in 4 m KI. This increase is supposed to be related both with hydrophilicity and with an increase of the density of states on Fermi level. The ultrasonic treatment enables one to significantly increase (more than 200 times) the density of states on Fermi level which in turn causes both quantitative and qualitative changes in farad-volt dependences. A hybrid supercapacitor with specific capacitance of 1100 F/g and specific energy of 49 Wh/kg per active mass of two electrodes was developed. PMID:23541908

  2. Micro Capacitance Measuring Circuit Based on AC Bridge%基于交流电桥的动态微弱电容检测电路

    Institute of Scientific and Technical Information of China (English)

    廉德钦; 何常德; 苗静; 杜春晖; 宛克敬; 薛晨阳

    2012-01-01

    基于MEMS技术研制的微电容超声传感器,在超声波作用下其有效电容的变化量仅为飞法级,且变化速度非常快,检测很困难.本文提出的半桥式交流电容检测电路能把快速变化的电容信号转换为电压信号,并加载到高频正弦激励信号中,再通过放大、解调、滤波得出电容变化量.该电路能很好地抑制寄生电容的影响,有良好的线性和稳定性,在200kHz的超声波作用下灵敏度可以达到2.8mV/fF,基本满足对超声传感器电容变化量的检测.%The Capacitive Micromachined Ultrasonic Transducers based on MEMS technology has developed.Under the action of ultrasound,the change of its effective capacitance is only fF-level and changes very fast,so measuring is very difficult.The half AC bridge capacitance detection circuit presented in this paper can convert the rapidly changing capacitance signal into voltage signal,and load the voltage signal into high-frequency sinusoidal excitation signal,then obtain capacitance variation through amplification,demodulation and filtering.The circuit effectively inhibits the influence of stray capacitance,and the linearity and stability of the circuit are good.The sensitivity can achieve 2.8mV7fF with 200kHz ultrasonic wave,and basically meet the needs of the micro capacitance change detection of the Capacitive Micromachined Ultrasonic Transducers.

  3. Silicon Micromachining

    Science.gov (United States)

    Elwenspoek, Miko; Jansen, Henri V.

    2004-08-01

    This comprehensive book provides an overview of the key techniques used in the fabrication of micron-scale structures in silicon. Recent advances in these techniques have made it possible to create a new generation of microsystem devices, such as microsensors, accelerometers, micropumps, and miniature robots. The authors underpin the discussion of each technique with a brief review of the fundamental physical and chemical principles involved. They pay particular attention to methods such as isotropic and anisotropic wet chemical etching, wafer bonding, reactive ion etching, and surface micromachining. There is a special section on bulk micromachining, and the authors also discuss release mechanisms for movable microstructures. The book is a blend of detailed experimental and theoretical material, and will be of great interest to graduate students and researchers in electrical engineering and materials science whose work involves the study of micro-electromechanical systems (MEMS).

  4. 微机械加工硅电容式加速度传感器%A silicon capacitive acceleration sensor made in micromachining technology

    Institute of Scientific and Technical Information of China (English)

    李跃进; 杨银堂; 朱作云; 马晓华; 陈锦杜

    2001-01-01

    The fundamental principle and fabricating process of a silicon capacitive accelerometer are described. The sensing element consists of a differential capacitor which is formed by a movable mass and two electrodes situated on anodically bonded glass plates. The application of a standard bipolar process allows the movable mass to be realized by anisotropic wet etching.The non-linearity of 10-4 magnitude is reached under a range of 20 gn.%介绍了硅电容式加速度传感器的工作原理和制作过程。传感器的敏感元件为一个差分电容器,它是由活动质量块与两个玻璃极板通过阳极键合形成。活动质量块用标准的双极工艺和各向异性腐蚀工艺制作。该传感器的量程为20?gn,线性度为10-4量级。

  5. Optical Micromachining

    Science.gov (United States)

    1998-01-01

    Under an SBIR (Small Business Innovative Research) with Marshall Space Flight Center, Potomac Photonics, Inc., constructed and demonstrated a unique tool that fills a need in the area of diffractive and refractive micro-optics. It is an integrated computer-aided design and computer-aided micro-machining workstation that will extend the benefits of diffractive and micro-optic technology to optical designers. Applications of diffractive optics include sensors and monitoring equipment, analytical instruments, and fiber optic distribution and communication. The company has been making diffractive elements with the system as a commercial service for the last year.

  6. Micromachined Silicon Cantilever Magnetometry.

    Science.gov (United States)

    Chaparala, M. V.

    1998-03-01

    Magnetic torque measurements give us a simple and attractive method for characterizing the anisotropic properties of magnetic materials. Silicon torque and force magnetometers have many advantages over traditional torsion fiber torque magnetometers. We have fabricated micromachined silicon torque and force magnetometers employing both capacitive(``Capacitance platform magnetometer for thin film and small crystal superconductor studies'', M. Chaparala et al.), AIP Conf. Proc. (USA), AIP Conference Proceedings, no.273, p. 407 1993. and strain dependent FET detection(``Strain Dependent Characterstics of Silicon MOSFETs and their Applications'', M. Chaparala et al.), ISDRS Conf. Proc. 1997. schemes which realize some of these gains. We will present the pros and cons of each of the different detection schemes and the associated design constraints. We have developed a feedback scheme which enables null detection thus preserving the integrity of the sample orientation. We will present a method of separating out the torque and force terms in the measured signals and will discuss the errors associated with each of the designs. Finally, we present the static magnetic torque measurements on various materials with these devices, including equilibrium properties on sub microgram specimens of superconductors, and dHvA measurements near H_c2. We will also discuss their usefulness in pulsed magnetic fields(``Cantilever magnetometry in pulsed magnetic fields", M. J. Naughton et al.), Rev. of Sci. Instrum., vol.68, p. 4061 1997..

  7. Micromachined pressure sensors: Review and recent developments

    Energy Technology Data Exchange (ETDEWEB)

    Eaton, W.P.; Smith, J.H. [Sandia National Labs., Albuquerque, NM (United States). Intelligent Micromachines Dept.

    1997-03-01

    Since the discovery of piezoresistivity in silicon in the mid 1950s, silicon-based pressure sensors have been widely produced. Micromachining technology has greatly benefited from the success of the integrated circuits industry, burrowing materials, processes, and toolsets. Because of this, microelectromechanical systems (MEMS) are now poised to capture large segments of existing sensor markets and to catalyze the development of new markets. Given the emerging importance of MEMS, it is instructive to review the history of micromachined pressure sensors, and to examine new developments in the field. Pressure sensors will be the focus of this paper, starting from metal diaphragm sensors with bonded silicon strain gauges, and moving to present developments of surface-micromachined, optical, resonant, and smart pressure sensors. Considerations for diaphragm design will be discussed in detail, as well as additional considerations for capacitive and piezoresistive devices.

  8. Technology trends in high temperature pressure transducers: The impact of micromachining

    Science.gov (United States)

    Mallon, Joseph R., Jr.

    1992-01-01

    This paper discusses the implications of micromachining technology on the development of high temperature pressure transducers. The introduction puts forth the thesis that micromachining will be the technology of choice for the next generation of extended temperature range pressure transducers. The term micromachining is defined, the technology is discussed and examples are presented. Several technologies for high temperature pressure transducers are discussed, including silicon on insulator, capacitive, optical, and vibrating element. Specific conclusions are presented along with recommendations for development of the technology.

  9. Humidity and aggregate content correction factors for air-coupled ultrasonic evaluation of concrete.

    Science.gov (United States)

    Berriman, J; Purnell, P; Hutchins, D A; Neild, A

    2005-02-01

    This paper describes the use of non-contact ultrasound for the evaluation of concrete. Micromachined capacitance transducers are used to transmit ultrasonic longitudinal chirp signals through concrete samples using air as the coupling medium, and a pulse compression technique is then employed for measurement of time of flight through the sample. The effect on the ultrasonic wave speed of storing concrete samples, made with the same water/cement ratio, at different humidity levels is investigated. It is shown that there is a correlation between humidity and speed of sound, allowing a correction factor for humidity to be derived. A strong positive linear correlation between aggregate content and speed of sound was then observed; there was no obvious correlation between compressive strength and speed of sound. The results from the non-contact system are compared with that from a contact system, and conclusions drawn concerning coupling of energy into the samples. PMID:15567195

  10. A silicon MEMS structure for characterization of femto-farad-level capacitive sensors with lock-in architecture

    OpenAIRE

    Wei, J; Chen, Z.L.; Liu, Z. W.; Sarro, P. M.

    2010-01-01

    This paper presents a silicon MEMS capacitive structure to investigate a test methodology for fF-level capacitive sensors’ measurement. The device mimics a capacitive sensor with a changing intermediate layer between the electrodes. A single mask bulk micromachining process is used to fabricate the device, which has a nominal capacitance of 1.2 fF. A high performance measurement setup based on lock-in principle is developed to detect the capacitance variation. The maximum capacitance variatio...

  11. Micromachined Ultrasonic Transducers for 3-D Imaging

    DEFF Research Database (Denmark)

    Christiansen, Thomas Lehrmann

    Real-time ultrasound imaging is a widely used technique in medical diagnostics. Recently, ultrasound systems offering real-time imaging in 3-D has emerged. However, the high complexity of the transducer probes and the considerable increase in data to be processed compared to conventional 2-D...... ultrasound imaging results in expensive systems, which limits the more wide-spread use and clinical development of volumetric ultrasound. The main goal of this thesis is to demonstrate new transducer technologies that can achieve real-time volumetric ultrasound imaging without the complexity and cost...... capable of producing 62+62-element row-column addressed CMUT arrays with negligible charging issues. The arrays include an integrated apodization, which reduces the ghost echoes produced by the edge waves in such arrays by 15:8 dB. The acoustical cross-talk is measured on fabricated arrays, showing a 24 d...

  12. A silicon MEMS structure for characterization of femto-farad-level capacitive sensors with lock-in architecture

    NARCIS (Netherlands)

    Wei, J.; Chen, Z.L.; Liu, Z.W.; Sarro, P.M.

    2010-01-01

    This paper presents a silicon MEMS capacitive structure to investigate a test methodology for fF-level capacitive sensors’ measurement. The device mimics a capacitive sensor with a changing intermediate layer between the electrodes. A single mask bulk micromachining process is used to fabricate the

  13. Micro-machining.

    Science.gov (United States)

    Brinksmeier, Ekkard; Preuss, Werner

    2012-08-28

    Manipulating bulk material at the atomic level is considered to be the domain of physics, chemistry and nanotechnology. However, precision engineering, especially micro-machining, has become a powerful tool for controlling the surface properties and sub-surface integrity of the optical, electronic and mechanical functional parts in a regime where continuum mechanics is left behind and the quantum nature of matter comes into play. The surprising subtlety of micro-machining results from the extraordinary precision of tools, machines and controls expanding into the nanometre range-a hundred times more precise than the wavelength of light. In this paper, we will outline the development of precision engineering, highlight modern achievements of ultra-precision machining and discuss the necessity of a deeper physical understanding of micro-machining. PMID:22802498

  14. Micromachining for Microelectromechanical Systems

    Directory of Open Access Journals (Sweden)

    K.N. Bhat

    1998-01-01

    Full Text Available The various micromachining processes required for micro engineering and for the successful realisation of micro eletro mechanical systems on Si are presented. The techniques presented include bulk and surface micro machining, Si fusion bonding, and the lithography, electroforming and micromoulding (LIGA process. The paper also includes discussion on the markets, applications and future trends for micro enginerated products.

  15. Micromachined Artificial Haircell

    Science.gov (United States)

    Liu, Chang (Inventor); Engel, Jonathan (Inventor); Chen, Nannan (Inventor); Chen, Jack (Inventor)

    2010-01-01

    A micromachined artificial sensor comprises a support coupled to and movable with respect to a substrate. A polymer, high-aspect ratio cilia-like structure is disposed on and extends out-of-plane from the support. A strain detector is disposed with respect to the support to detect movement of the support.

  16. Feasibility of MR-temperature mapping of ultrasonic heating from a CMUT.

    Science.gov (United States)

    Wong, Serena H; Watkins, Ronald D; Kupnik, Mario; Pauly, Kim Butts; Khuri-Yakub, Butrus T

    2008-04-01

    In the last decade, high intensity focused ultrasound (HIFU) has gained popularity as a minimally invasive and noninvasive therapeutic tool for treatment of cancers, arrhythmias, and other medical conditions. HIFU therapy is often guided by magnetic resonance imaging (MRI), which provides anatomical images for therapeutic device placement, temperature maps for treatment guidance, and postoperative evaluation of the region of interest. While piezoelectric transducers are dominantly used for MR-guided HIFU, capacitive micromachined ultrasonic transducers (CMUTs) show competitive advantages, such as ease of fabrication, integration with electronics, improved efficiency, and reduction of self-heating. In this paper, we will show our first results of an unfocused CMUT transducer monitored by MR-temperature maps. This 2.51 mm by 2.32 mm, unfocused CMUT heated a HIFU phantom by 14 degrees C in 2.5 min. This temperature rise was successfully monitored by MR thermometry in a 3.0 T General Electric scanner. PMID:18467225

  17. A silicon MEMS structure for characterization of femto-farad-level capacitive sensors with lock-in architecture

    International Nuclear Information System (INIS)

    This paper presents a silicon MEMS capacitive structure to investigate a test methodology for fF-level capacitive sensors' measurement. The device mimics a capacitive sensor with a changing intermediate layer between the electrodes. A single mask bulk micromachining process is used to fabricate the device, which has a nominal capacitance of 1.2 fF. A high performance measurement setup based on lock-in principle is developed to detect the capacitance variation. The maximum capacitance variation of the fabricated device is 0.31 fF, and the capacitance detection limit is 0.095 aF Hz−1/2.

  18. Micromachining using focused ion beams

    International Nuclear Information System (INIS)

    Focused ion beam (FIB) systems prove to be useful precision micromachining tools for a wide variety of applications. This micromachining technique includes scanning ion microscopy (SIM), micromachining by physical sputtering, and the ion-beam induced surface chemistry for etching and deposition. This technique is applied to image and modify IC's, to micromechanical applications, to modify the tip shape of tungsten emitters, and to prepare cross sections of selected regions for inspection in a transmission electron microscope (TEM). (orig.)

  19. Micromachining and its application

    International Nuclear Information System (INIS)

    Micromachining is a useful technique for manufacturing of micrometer-dimension structures. It also has a ready-made means of mass production in wafer fabrication lines. We studied the present micromachining techniques : photo fabrication, anisotropic etching, anodic bonding and so on. Furthermore, novel process techniques using high energy ion implantation technology were developed, i.e., (1) physical property modification of monocrystalline silicon and poly-silicon, (2) formation of a monocrystalline silicon thin film structure and (3) formation of a buried resistor. In addition, we fabricated two types of mechanical sensors by way of trial ; one is a micro liquid flow sensor and the other is a vacuum sensor which contains a monocrystalline silicon resonator. (author)

  20. MEMS Capacitive Pressure Sensors: A Review on Recent Development and Prospective

    Directory of Open Access Journals (Sweden)

    Eswaran P

    2013-06-01

    Full Text Available Recently MEMS Capacitive Pressure Sensor gains more advantage over micromachined piezoresistive pressure sensor due to high sensitivity, low power consumption, free from temperature effects, IC compatibility, etc,. The spectrum of capacitive pressure sensor application is increasing, hence it is essential to review the path of technological development and further prospective of micromachinedcapacitive pressure sensor. This paper focuses on the review of various types of capacitive pressure sensor principle, MEMS materials used in fabrication, procedures adopted in microfabrication for silicon and polymer material diaphragm, bonding and packaging techniques used. Selected result on capacitive sensitivity, effect of temperature on capacitive sensitivity was also presented. Finally, the development of smart sensor was discussed.

  1. Trends in laser micromachining

    Science.gov (United States)

    Gaebler, Frank; van Nunen, Joris; Held, Andrew

    2016-03-01

    Laser Micromachining is well established in industry. Depending on the application lasers with pulse length from μseconds to femtoseconds and wavelengths from 1064nm and its harmonics up to 5μm or 10.6μm are used. Ultrafast laser machining using pulses with pico or femtosecond duration pulses is gaining traction, as it offers very precise processing of materials with low thermal impact. Large-scale industrial ultrafast laser applications show that the market can be divided into various sub segments. One set of applications demand low power around 10W, compact footprint and are extremely sensitive to the laser price whilst still demanding 10ps or shorter laser pulses. A second set of applications are very power hungry and only become economically feasible for large scale deployments at power levels in the 100+W class. There is also a growing demand for applications requiring fs-laser pulses. In our presentation we would like to describe these sub segments by using selected applications from the automotive and electronics industry e.g. drilling of gas/diesel injection nozzles, dicing of LED substrates. We close the presentation with an outlook to micromachining applications e.g. glass cutting and foil processing with unique new CO lasers emitting 5μm laser wavelength.

  2. 3D proton beam micromachining

    International Nuclear Information System (INIS)

    Focused high energy ion beam micromachining is the newest of the micromachining techniques. There are about 50 scanning proton microprobe facilities worldwide, but so far only few of them showed activity in this promising field. High energy ion beam micromachining using a direct-write scanning MeV ion beam is capable of producing 3D microstructures and components with well defined lateral and depth geometry. The technique has high potential in the manufacture of 3D molds, stamps, and masks for X-ray lithography (LIGA), and also in the rapid prototyping of microcomponents either for research purposes or for components testing prior to batch production. (R.P.)

  3. Micromachined capacitive pressure sensor with signal conditioning electronics

    OpenAIRE

    Fragiacomo, Giulio; Hansen, Ole; Thomsen, Erik Vilain; Kjærgaard, Claus; Christensen, Carsten

    2012-01-01

    Dette projekt vedrører kapacitive mikrotryksensorer til barske omgivelser og dertil relaterede elektroniske grænseflader. Mikroeletromekaniske systemer (MEMS) er ofte benyttede, frem for makroskopiske sensorsystmer, inden for flere forskellige felter og er i mange tilfælde den eneste løsningsmodel, f.eks. i de tilfælde hvor størrelsen af sensorelementet er en begrænsende faktor. Derudover kan brugen af MEMS reducere omkostninger og energiforbrug væsentligt, hvorfor MEMS ofte anvendes til forb...

  4. Capacitive Extensometer

    Science.gov (United States)

    Perusek, Gail P. (Inventor)

    2003-01-01

    The present invention provides for measurements of the principal strain magnitudes and directions, and maximum shear strain that occurs in a porous specimen, such as plastic, ceramic or porous metal, when it is loaded (or subjected to a load). In one embodiment the invention includes a capacitive delta extensometer arranged with six sensors in a three piece configuration, with each sensor of each pair spaced apart from each other by a predetermined angle, such as 120 degrees.

  5. Micromachined electrode array

    Energy Technology Data Exchange (ETDEWEB)

    Okandan, Murat (Edgewood, NM); Wessendorf, Kurt O. (Albuquerque, NM)

    2007-12-11

    An electrode array is disclosed which has applications for neural stimulation and sensing. The electrode array, in certain embodiments, can include a plurality of electrodes each of which is flexibly attached to a common substrate using a plurality of springs to allow the electrodes to move independently. In other embodiments of the electrode array, the electrodes can be fixed to the substrate. The electrode array can be formed from a combination of bulk and surface micromachining, and can include electrode tips having an electroplated metal (e.g. platinum, iridium, gold or titanium) or a metal oxide (e.g. iridium oxide) for biocompatibility. The electrode array can be used to form a part of a neural prosthesis, and is particularly well adapted for use in an implantable retinal prosthesis.

  6. Micromachining with Nanostructured Cutting Tools

    CERN Document Server

    Jackson, Mark J

    2013-01-01

    The purpose of the brief is to explain how nanostructured tools can be used to machine materials at the microscale.  The aims of the brief are to explain to readers how to apply nanostructured tools to micromachining applications. This book describes the application of nanostructured tools to machining engineering materials and includes methods for calculating basic features of micromachining. It explains the nature of contact between tools and work pieces to build a solid understanding of how nanostructured tools are made.

  7. Development of ultrasonic imaging transducer%超声成像换能器技术的发展

    Institute of Scientific and Technical Information of China (English)

    李文龙; 菅喜岐

    2008-01-01

    作为超声波发射和回波接收器件的换能器,始终是医学超声成像系统中最为关键的声学部件.随着超声成像换能器技术的不断发展使超声图像更清晰,更直观.主要论述新型压电复合材料换能器、压电单晶材料换能器、宽频带换能器、三维成像换能器和电容式微加工换能器的技术发展及其展望.%Transducer,which acts as both ultrasound emitter and echo receiver,is the most important acoustics part in medical ultrasonic imaging system.The development of ultrasonic imaging technology makes ultrasound image clearer and more intuitionistic.This paper mainly introduces the technical development and the prospects of piezocomposite transducer,piezoelectric single crystal transducer,wide-band transducer,3D imaging transducer and capacitive micromachined ultrasonic transducer(cMUT).

  8. Super-resolution ultrasonic imaging of stiffness variations on a microscale active metasurface

    Science.gov (United States)

    Lani, Shane; Sabra, Karim G.; Degertekin, F. Levent

    2016-02-01

    Surface acoustic waves propagating over an immersed membrane metasurface, such as an array of capacitive micromachined ultrasonic transducers, can be leveraged to achieve subwavelength focusing and imaging. This is demonstrated numerically and experimentally utilizing a time reversal method on a 2D membrane array at MHz frequencies. The focusing region is a dense metasurface of CMUT membranes with 6.5 MHz resonance frequency that supports a wave field that is evanescent normal to the metasurface and capable of super-resolution along the metasurface. Electrostatically actuated membranes, spatially separate from the focusing region, are used to generate the focused wave field. Subwavelength focusing is demonstrated on the metasurface with a resolution of a single membrane resonator or λ/5. Similar techniques allow for super-resolution imaging of a subwavelength defect or change in the medium of the focusing region. A subwavelength sized imaging target, obtained by altering the stiffness of a single membrane by 1.2%, is shown to be properly imaged with subwavelength resolution. These results pave the way for practical implementation of ultrasonic super-resolution imaging systems using metasurfaces.

  9. Micromachining with DUV lasers

    Science.gov (United States)

    Toenshoff, Hans K.; Kappel, Heiner; Heekenjann, Peter B.

    1997-04-01

    In many industrial branches a continuous scaling down of parts and products is observed. For example in the fields of micro-mechanics new sensors and actuators can be produced which offer the possibility of making self acting micro- systems. Other micro-components for medicine, chemistry or optics allow minimal invasive surgery and inspection. In every case conventional fabrication technologies such as turning and milling have to be carefully investigated: their appropriateness for the production of micro-parts is not always guaranteed. On the other hand new technologies such as the LIGA-process (German acronym for lithography, galvano forming and plastic molding process) open new ways to inexpensive mass-production. The following paper describes the potential of DUV-lasers (laser wavelength: lambda equals 200 - 280 nm) for micro-machining specific applications. Using excimer-lasers the machining of ceramics, glass and polymer materials is presented. The excellent beam properties of a self developed quadrupled Nd:YAG-laser are used for the repair of photolithographic masks. The mask repair using ablation and deposition of chromium on glass substrate is described.

  10. Design, Fabrication and Levitation Experiments of a Micromachined Electrostatically Suspended Six-Axis Accelerometer

    OpenAIRE

    Weiping Zhang; Xiaosheng Wu; Wenyuan Chen; Wu Liu; Feng Cui

    2011-01-01

    A micromachined electrostatically suspended six-axis accelerometer, with a square plate as proof mass housed by a top stator and bottom stator, is presented. The device structure and related techniques concerning its operating principles, such as calculation of capacitances and electrostatic forces/moments, detection and levitation control of the proof mass, acceleration measurement, and structural parameters design, are described. Hybrid MEMS manufacturing techniques, including surface micro...

  11. Fiber Optic Broadband Ultrasonic Probe for Virtual Biopsy: Technological Solutions

    OpenAIRE

    Biagi, E.; Cerbai, S.; Masotti, L.; L. Belsito; A. RONCAGLIA; Masetti, G.; N. Speciale

    2010-01-01

    An ultrasonic probe was developed by using, in conjunction, optoacoustic and acousto-optic devices based on fiber optic technology. The intrinsic high frequency and wide bandwidth associated both to the opto-acoustic source and to the acousto-optic receiving element could open a way towards a “virtual biopsy” of biological tissue. A Micro-Opto-Mechanical-System (MOMS) approach is proposed to realize the broadband ultrasonic probe on micromachined silicon frames suited to be mounted on the tip...

  12. Electron beam micromachining of plastics

    Czech Academy of Sciences Publication Activity Database

    Dupák, Libor

    2014-01-01

    Roč. 49, 5-6 (2014), s. 310-314. ISSN 0861-4717 R&D Projects: GA MŠk(CZ) LO1212; GA MŠk ED0017/01/01; GA MŠk EE.2.3.20.0103 Institutional support: RVO:68081731 Keywords : micromachining of plastics * Electron beam Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

  13. Laser micromachining of goldblack coatings.

    Science.gov (United States)

    Nelms, N; Dowson, J; Rizvi, N; Rohr, T

    2006-09-20

    Goldblack deposits have been used as high-absorption coatings for thermal infrared detectors for a number of years, principally on large single, or few pixel detectors. We present a new technique that allows the benefits of goldblack to be applied to the current generation of small pixel silicon micromachined thermal infrared detectors. PMID:16946774

  14. False capacitance of supercapacitors

    OpenAIRE

    Ragoisha, G. A.; Aniskevich, Y. M.

    2016-01-01

    Capacitance measurements from cyclic voltammetry, galvanostatic chronopotentiometry and calculation of capacitance from imaginary part of impedance are widely used in investigations of supercapacitors. The methods assume the supercapacitor is a capacitor, while real objects correspond to different equivalent electric circuits and show various contributions of non-capacitive currents to the current which is used for calculation of capacitance. Specific capacitances which are presented in F g-1...

  15. A novel model for calculating the inter-electrode capacitance of wedge-strip anode

    Science.gov (United States)

    Zhao, Airong; Ni, Qiliang

    2016-04-01

    The wedge strip anode (WSA) detector has been widely used in particle detection. In this work, a novel model for calculating the inter-electrode capacitance of WSA was proposed on the basis of conformal transformations and the partial capacitance method. Based on the model, the inter-electrode capacitance within a period was calculated besides the total inter-electrode capacitance. As a result, the effects of the WSA design parameters on the inter-electrode capacitance are systematically analyzed. It is found that the inter-electrode capacitance monotonically increases with insulated gap and substrate permittivity but not with the period. In order to prove the validation of the model, two round WSAs were manufactured by employing the picosecond laser micro-machining technology. It is found that 9%-15% errors between the theoretical and experimental results can be obtained, which is better than that obtained by employing ANSYS software.

  16. Ultrasonic Microtransport

    Science.gov (United States)

    Moroney, Richard Morgan, III

    We have observed numerous kinetic effects using ultrasonic flexural plate waves (FPWs) in 4mu -thick composite plates of low-stress silicon nitride, piezoelectric zinc oxide and aluminum. The wavelength is typically 100 mum, and the area 3 x 8 mm^2. A successful new surface micromachining fabrication process is presented here for the first time. FPWs have been used to move liquids and gasses with motion typically indicated by polysilicon blocks in air and polystyrene spheres in water; the velocity in air is 4.5 mm/s (with a zero-to-peak input of 3 V), and in water it is 100 mum/s (with an input of 7.8 V). Other observations include pumping of a liquid dye, and mixing near the FPW surface. All quantitative observations demonstrate that the kinetic effects of FPWs are proportional to the square of the wave amplitude. The amplitude for a typical device is 250 A at 9 V input; the power in a typical FPW is about 2 mW. The amplitude can be accurately measured using a laser diffraction technique. Experimental error is about +/-10%, and many of the results agree well with a simple theory to predict the FPW amplitude; extensions of the theory model the fluid loading of FPW devices, but experiment and theory disagree by about 15%. Pumping by flexural plate waves is an example of the phenomenon known as acoustic streaming. A common solution approach is the method of successive approximations, where the nonlinear equations are first linearized and solved. This "first-order" solution is then used to determine the inhomogeneous source terms in the linearized, "second -order" equations of motion. Theoretical predictions of streaming theory are in excellent agreement with experiment in the case where the FPW device contacts a half-space of fluid; predictions for flow in small channels encourage the development of integrated micropumps. Applications for microflow include thermal redistribution in integrated circuits and liquid movement in analytical instruments--particularly where

  17. A Surface Micromachined CMOS MEMS Humidity Sensor

    OpenAIRE

    Jian-Qiu Huang; Fei Li; Min Zhao; Kai Wang

    2015-01-01

    This paper reports a CMOS MEMS (complementary metal oxide semiconductor micro electromechanical system) piezoresistive humidity sensor fabricated by a surface micromachining process. Both pre-CMOS and post-CMOS technologies were used to fabricate the piezoresistive humidity sensor. Compared with a bulk micromachined humidity sensor, the machining precision and the sizes of the surface micromachined humidity sensor were both improved. The package and test systems of the sensor were designed. A...

  18. Laser Micromachining of Glass, Silicon, and Ceramics

    OpenAIRE

    L. Rihakova; Chmelickova, H.

    2015-01-01

    A brief review is focused on laser micromachining of materials. Micromachining of materials is highly widespread method used in many industries, including semiconductors, electronic, medical, and automotive industries, communication, and aerospace. This method is a promising tool for material processing with micron and submicron resolution. In this paper micromachining of glass, silicon, and ceramics is considered. Interaction of these materials with laser radiation and recent research held o...

  19. Review of polymer MEMS micromachining

    International Nuclear Information System (INIS)

    The development of polymer micromachining technologies that complement traditional silicon approaches has enabled the broadening of microelectromechanical systems (MEMS) applications. Polymeric materials feature a diverse set of properties not present in traditional microfabrication materials. The investigation and development of these materials have opened the door to alternative and potentially more cost effective manufacturing options to produce highly flexible structures and substrates with tailorable bulk and surface properties. As a broad review of the progress of polymers within MEMS, major and recent developments in polymer micromachining are presented here, including deposition, removal, and release techniques for three widely used MEMS polymer materials, namely SU-8, polyimide, and Parylene C. The application of these techniques to create devices having flexible substrates and novel polymer structural elements for biomedical MEMS (bioMEMS) is also reviewed. (topical review)

  20. Analysis of small deflection touch mode behavior in capacitive pressure sensors

    DEFF Research Database (Denmark)

    Fragiacomo, Giulio; Ansbæk, Thor; Pedersen, Thomas;

    2010-01-01

    Due to an increasing need for devices with low power consumption, capacitive pressure sensors have become good substitutes for the well known piezoresistive pressure sensors. Mathematical models are necessary to design and characterize the device, preferably the model is analytical such that...... geometrical scalings are revealed. We show that, in the case of linear elastic behavior, a simple analytical model can be found for a touch mode capacitive pressure sensor (TMCPS). With this model it is possible to readily evaluate the main features of a TMCPS such as: sensitivity (both in normal and touch...... mode), touch point pressure and parasitic capacitance. Therefore, the desired device can be designed without using finite element modeling (FEM). This reduces the effort needed to design a micromachined TMCPS. Finally, the model has been compared with a micromachined TMCPS showing an excellent...

  1. Quasimetallic silicon micromachined photonic crystals

    International Nuclear Information System (INIS)

    We report on fabrication of a layer-by-layer photonic crystal using highly doped silicon wafers processed by semiconductor micromachining techniques. The crystals, built using (100) silicon wafers, resulted in an upper stop band edge at 100 GHz. The transmission and defect characteristics of these structures were found to be analogous to metallic photonic crystals. We also investigated the effect of doping concentration on the defect characteristics. The experimental results agree well with predictions of the transfer matrix method simulations

  2. Resist materials for proton micromachining

    International Nuclear Information System (INIS)

    The production of high aspect ratio microstructures is a potential growth area. The combination of deep X-ray lithography with electroforming and micromolding (i.e. LIGA) is one of the main techniques used to produce 3D microstructures. The new technique of proton micromachining employs focused MeV protons in a direct write process which is complementary to LIGA, e.g. micromachining with 2 MeV protons results in microstructures with a height of 63 μm and lateral sub-micrometer resolution in PMMA resist. The aim of this paper is to investigate the capabilities of proton micromachining as a lithographic technique. This involves the study of different types of resists. The dose distribution of high molecular weight PMMA is compared with three other types of resist: First the positive photo resist AZ P4620 will be discussed and then PMGI SF 23, which can be used as a deep UV, e-beam or X-ray resist. Finally SU-8, a new deep UV negative type of chemically amplified resist will be discussed. All these polymers are applied using the spin coating technique at thicknesses of between 1 and 36 μm

  3. Efficient Sonochemistry through Microbubbles Generated with Micromachined Surfaces

    CERN Document Server

    Rivas, David Fernandez; Zijlstra, Aaldert G; Lohse, Detlef; Gardeniers, Han J G E; 10.1002/anie.201005533

    2012-01-01

    Sonochemical reactors are used in water treatment, the synthesis of fine chemicals, pharmaceutics and others. The low efficiency of sonoreactors have prevented its massive usage at industrial scales. Controlling the appearance of bubbles in place and time is the most limiting factor. A novel type of sonochemical reactor was designed making use of micro-fabrication techniques to control the nucleation sites of micro-bubbles. The efficiency was increased first by locating the nucleation sites in the most active region of a micro-chamber; additionally the desired chemical effect was significantly higher at the same powers than when not controlled. Silicon substrates were micromachined with "artificial nucleation sites" or pits, and placed at the bottom of the micro-chamber. The pits entrap gas which, upon ultrasonic excitation, sheds off a stream of microbubbles. The gas content of the pits is not depleted but is replenished by diffusion and the emission of microbubbles can continue for hours.

  4. Flexible capacitive behavior of hybrid carbon materials prepared from graphene sheets

    Science.gov (United States)

    Ding, Y.-H.; Xie, W.; Zhang, P.; Jiang, Y.

    2016-06-01

    High frequency ultrasonication was employed to reduce the aggregation of graphene by constructing hybrid carbon materials (HCMs), which are endowed with a large electrochemical reaction area and high energy density. HCMs exhibited a specific capacitance of 168.5 F · g‑1 with ∼100% capacitance retention over 500 cycles. Flexible supercapacitors fabricated from HCMs also showed an excellent capacitive behavior even under tough conditions. These outstanding electrochemical properties were ascribed to the increased specific surface area and open structure of HCMs.

  5. Micromachining of Silicon Carbide using femtosecond lasers

    Energy Technology Data Exchange (ETDEWEB)

    Farsari, M [Institute of Electronic Structure and Laser, Foundation for Research and Technology - Hellas, PO Box 1527, 71110 Heraklion, Crete (Greece); Filippidis, G [Institute of Electronic Structure and Laser, Foundation for Research and Technology - Hellas, PO Box 1527, 71110 Heraklion, Crete (Greece); Zoppel, S [Vienna University of Technology, Photonics Institute, Gusshausstr. 27-29/387, 1040 Vienna (Austria); Reider, G A [Vienna University of Technology, Photonics Institute, Gusshausstr. 27-29/387, 1040 Vienna (Austria); Fotakis, C [Institute of Electronic Structure and Laser, Foundation for Research and Technology - Hellas, PO Box 1527, 71110 Heraklion, Crete (Greece)

    2007-04-15

    We have demonstrated micromachining of bulk 3C silicon carbide (3C- SiC) wafers by employing 1028nm wavelength femtosecond laser pulses of energy less than 10 nJ directly from a femtosecond laser oscillator, thus eliminating the need for an amplified system and increasing the micromachining speed by more than four orders of magnitude.

  6. Micromachining of Silicon Carbide using femtosecond lasers

    International Nuclear Information System (INIS)

    We have demonstrated micromachining of bulk 3C silicon carbide (3C- SiC) wafers by employing 1028nm wavelength femtosecond laser pulses of energy less than 10 nJ directly from a femtosecond laser oscillator, thus eliminating the need for an amplified system and increasing the micromachining speed by more than four orders of magnitude

  7. Micromachining applications for ICF target fabrication

    International Nuclear Information System (INIS)

    Micromachining techniques used in Inertial Confinement Fusion (ICF) target fabrication encompass laser drilling, single point diamond turning, and plasma as well as chemical etching. These techniques have been developed by several laboratories to produce target components with tolerances and surface finishes in the micron to submicron regime. Some of the spherical target components produced by micromachining techniques include free standing hemispherical shells (diameters 50--500 mm), micron-sized holes in thin glass shells, and plastic-coated glass microballons with surfaces which have been smoothly machined to remove a mounting stalk. Planar targets and components produced by these techniques include small disks and washers of thin brittle materials. Micromachining techniques are also used to fabricate diagnostic instruments such as x-ray mirrors and zone plates. This paper will examine micromachining techniques used to produce target components and diagnostic instruments. The relationship of each micromachining technique to presently used target configurations will also be discussed

  8. Ultrasonic testing

    Energy Technology Data Exchange (ETDEWEB)

    Song, Sung Jin [Sungkwunkwan Univ., Seoul (Korea, Republic of); Jeong, Hyun Jo [Wonkwang Univ., Iksan (Korea, Republic of)

    2004-02-15

    For the proper performance of ultrasonic testing of steel welded joints, and anisotropic material it is necessary to have sound understanding on the underlying physics. To provide such an understanding, it is beneficial to have simulation tools for ultrasonic testing. In order to address such a need, we develop effective approaches to simulate angle beam ultrasonic testing with a personal computer. The simulation is performed using ultrasonic measurement models based on the computationally efficient multi-Gaussian beams. This reach will describe the developed ultrasonic testing models together with the experimental verification of their accuracy.

  9. ON-LINE SELF-TESTING FOR MICRO-MACHINED GYROSCOPES

    Institute of Scientific and Technical Information of China (English)

    GAISSERAlexander; GAOZhong-yu; ZHANGRong; CHENZhi-yong; ZHOUBin

    2005-01-01

    An on line self-testing for Coriolis vibratory gyroscopes (CVGs) is realized according to a digital readout electronics for capacitive sensors and micro-machined angular rate sensors. By applying some additional signals to the micro machined structure, the actual noise performance (<0.1°/s) is not worsened. The running of the primary and the secondary oscillators of CVGs is verified by self-testing. Compared with other methods, the device needs not to check the functionality. In this new approach the on-line testing is conducted at any time without disturbing the normal operational mode. Based on the approach the performance of the micro machined gyroscope can be improved and a secure availability of the functionality of the micro-machined angular rate sensor is guaranteed. Furthermore, the error signal is generated when the sensor works incorrectly.

  10. Reduction of out-of-plane warpage in surface micromachined beams using corrugation

    International Nuclear Information System (INIS)

    Corrugation is proposed as a means of reducing the out-of-plane warpage in surface micromachined beams that result from an asymmetric vertical stress profile. Corrugation increases beam bending stiffness without increasing film thickness, making the beam more immune to intrinsic vertical stress gradients without requiring longer film deposition times, increased beam mass, or careful stress optimization. The technique was tested using a dual-thickness metal surface micromachining process with a photoresist sacrificial layer. Several corrugation patterns and geometries were tested, and the best performing pattern was implemented on a MEMS actuator array. The off-state to on-state capacitance delta of the array improved from 0.24 to 0.7pF and the beam curvature decreased from 180 to 50 nm compared with an uncorrugated array. Other device performance parameters, such as 30 V pull-in voltage and 5 billion cycle switching lifetime, were unaffected. (paper)

  11. Mesoscopic Capacitance Oscillations

    OpenAIRE

    Buttiker, Markus; Nigg, Simon

    2006-01-01

    We examine oscillations as a function of Fermi energy in the capacitance of a mesoscopic cavity connected via a single quantum channel to a metallic contact and capacitively coupled to a back gate. The oscillations depend on the distribution of single levels in the cavity, the interaction strength and the transmission probability through the quantum channel. We use a Hartree-Fock approach to exclude self-interaction. The sample specific capacitance oscillations are in marked contrast to the c...

  12. Micromachined Thermal Flow Sensors—A Review

    Directory of Open Access Journals (Sweden)

    Jonathan T. W. Kuo

    2012-07-01

    Full Text Available Microfabrication has greatly matured and proliferated in use amongst many disciplines. There has been great interest in micromachined flow sensors due to the benefits of miniaturization: low cost, small device footprint, low power consumption, greater sensitivity, integration with on-chip circuitry, etc. This paper reviews the theory of thermal flow sensing and the different configurations and operation modes available. Material properties relevant to micromachined thermal flow sensing and selection criteria are also presented. Finally, recent applications of micromachined thermal flow sensors are presented. Detailed tables of the reviewed devices are included.

  13. Micromachining process – current situation and challenges

    Directory of Open Access Journals (Sweden)

    Lalakiya Meet Rajeshkumar

    2015-01-01

    Full Text Available The rapid progress in the scientific innovations and the hunt for the renewable energy increases the urge for producing the bio electronic products, solar cells, bio batteries, nano robots, MEMS, blood less surgical tools which can be possible with the aid of the micromachining. This article helps us to understand the evolution and the challenges faced by the micromachining process. Micro machining is an enabling technology that facilitates component miniaturization and improved performance characteristics. Growing demand for less weight, high accuracy, high precision, meagre lead time, reduced batch size, less human interference are the key drivers for the micromachining than the conventional machining process.

  14. Ultrasonic physics

    CERN Document Server

    Richardson, E G

    1962-01-01

    Ultrasonic Physics, Second Edition, provides an introduction to the fundamental principles of ultrasonic physics. The book opens with a discussion of the sources of ultrasound. This is followed by separate chapters on the properties and detection of ultrasonic radiation; measurement of propagation constants, i.e., the velocity and absorption, of ultrasound; ultrasound propagation in gases, liquids, and solids; and ultrasound propagation in aerosols, suspensions, and emulsions. The final chapter covers miscellaneous physical and physico-chemical actions, including dispersion and coagulation of

  15. Laser Micromachining Fabrication of THz Components

    Science.gov (United States)

    DrouetdAubigny, C.; Walker, C.; Jones, B.; Groppi, C.; Papapolymerou, J.; Tavenier, C.

    2001-01-01

    Laser micromachining techniques can be used to fabricate high-quality waveguide structures and quasi-optical components to micrometer accuracies. Successful GHz designs can be directly scaled to THz frequencies. We expect this promising technology to allow the construction of the first fully integrated THz heterodyne imaging arrays. At the University of Arizona, construction of the first laser micromachining system designed for THz waveguide components fabrication has been completed. Once tested and characterized our system will be used to construct prototype THz lx4 focal plane mixer arrays, magic tees, AR coated silicon lenses, local oscillator source phase gratings, filters and more. Our system can micro-machine structures down to a few microns accuracy and up to 6 inches across in a short time. This paper discusses the design and performance of our micromachining system, and illustrates the type, range and performance of components this exciting new technology will make accessible to the THz community.

  16. Variable Synthetic Capacitance

    Science.gov (United States)

    Kleinberg, L. L.

    1986-01-01

    Feedback amplifier circuit synthesizes electronically variable capacitance. Variable Synthetic Capacitor is amplifier circuit with follower/feedback configuration. Effective input capacitance depends on input set current. If synthetic capacitor is connected across resonant element of oscillator, oscillator frequency controlled via input set current. Circuit especially suitable for fine frequency adjustments of piezoelectric-crystal or inductor/capacitor resonant oscillators.

  17. Silicon-micromachined microchannel plates

    CERN Document Server

    Beetz, C P; Steinbeck, J; Lemieux, B; Winn, D R

    2000-01-01

    Microchannel plates (MCP) fabricated from standard silicon wafer substrates using a novel silicon micromachining process, together with standard silicon photolithographic process steps, are described. The resulting SiMCP microchannels have dimensions of approx 0.5 to approx 25 mu m, with aspect ratios up to 300, and have the dimensional precision and absence of interstitial defects characteristic of photolithographic processing, compatible with positional matching to silicon electronics readouts. The open channel areal fraction and detection efficiency may exceed 90% on plates up to 300 mm in diameter. The resulting silicon substrates can be converted entirely to amorphous quartz (qMCP). The strip resistance and secondary emission are developed by controlled depositions of thin films, at temperatures up to 1200 deg. C, also compatible with high-temperature brazing, and can be essentially hydrogen, water and radionuclide-free. Novel secondary emitters and cesiated photocathodes can be high-temperature deposite...

  18. Micromachining with SR and FEL

    International Nuclear Information System (INIS)

    This article describes the micromachining technologies to fabricate thick and three-dimensional microstructures. Deep X-ray lithography using an 0.6 GeV compact SR source have been realized to fabricate thick structures, developing a high transparency X-ray mask and a high sensitivity resist. Moreover, a sacrificial layer process and micro electro-discharge machining have been combined with deep X-ray lithography for the fabrication of more complicated structures such as cantilever and tapered shaped structures. Also, the prospective use of an FEL is considered towards the development of true three-dimensional microstructures. (Copyright (c) 1998 Elsevier Science B.V., Amsterdam. All rights reserved.)

  19. Electrochemical micromachining of passive electrodes

    International Nuclear Information System (INIS)

    The electronic model describing the electrochemical micromachining (ECMM) of passive electrodes utilizing the transpassive dissolution is discussed. Numerical simulations are performed on a machining model circuit using measured electrochemical properties of the model system which consisted of a tungsten tool electrode, a 1 M H2SO4 electrolyte and a stainless steel work piece electrode. The results of these simulations were verified by performing machining experiments applying the same model system. For a passive stainless steel electrode it is shown that it can be treated like an actively dissolving electrode with high reaction overpotential. The efficiency of the machining process can be enhanced by polarizing the steel work piece electrode close to the transpassive potential region. Three different ways of achieving this polarization are discussed: by polarizing the work piece electrode only, by polarizing both electrodes and by adding oxidizing species to the electrolyte solution

  20. Micromachining process – current situation and challenges

    OpenAIRE

    Lalakiya Meet Rajeshkumar

    2015-01-01

    The rapid progress in the scientific innovations and the hunt for the renewable energy increases the urge for producing the bio electronic products, solar cells, bio batteries, nano robots, MEMS, blood less surgical tools which can be possible with the aid of the micromachining. This article helps us to understand the evolution and the challenges faced by the micromachining process. Micro machining is an enabling technology that facilitates component miniaturization and improved performance c...

  1. Realization of CMOS compatible micromachined chemical sensors

    OpenAIRE

    Demirci, Tuğba; Demirci, Tugba

    2002-01-01

    The chemical sensors are fabricated using IC manufacturing technologies, providing a smaller size and lower weight, lower power consumption, and lower cost due to the automated and batch production. During the last two decades, largely two-dimensional Integrated Circuit (IC) fabrication technology has been extended into the third dimension by micromachining technologies [1]. Micromachining has been used to produce a growing variety of micromechanical structures, including automotive pressure ...

  2. Micromachining of electret materials, advantages and possibilities

    OpenAIRE

    Voorthuyzen, J.A.; Bergveld, P.

    1988-01-01

    A process is described for the micromachining of organic electret materials like Teflon FEP (fluorinated ethylene propylene). The authors have used photolithography and plasma etching, by which electrets can be etched selectively. The advantages of micromachining electrets in such a way are numerous. Miniature sensors like microphones and pressure sensors, containing local areas using Teflon, have been realized in the authors' laboratories. The process can also be used for electret research. ...

  3. The micromachined logo of Atomki

    International Nuclear Information System (INIS)

    Complete text of publication follows. Proton Beam Micromachining, also known as P-beam Writing, is a direct write 3- dimensional lithographic technique. Conventional resist types are PMMA (polymethylmethacrylate), and SU-8 (of MicroChem Corp.); they are positive and negative resists, respectively. In this work we used SU-8, the most common negative resist material. SU-8 was spun on a flat surface, typically Silicon or glass. A direct write proton beam was scanned over an arbitary structure (the Atomki logo can be replaced by any other structure), which produces chain scissioning in the polymer. Post exposure bake (PEB) is usually needed in case of conventional optical lithography, but using protons this bake is done in situ as the ions heat up the sample in vacuum. Subsequently chemical etching takes place, the solvent is available at MicroChem Corp. The schematic diagram of the above described micromachining process is shown on Fig. 1. The irradiation requires a scanning proton microbeam system equipped with suitable beam scanning and blanking facilities. This is available in the Institute, our setup has been upgraded from doublet to triplet focusing system (Oxford Microbeams Ltd.). For scanning we use a DIO card (PCI-6731 of National Instruments), and the IonScan software [1]. Sample preparation was carried out at our 'semi clean' room. This is also where chemical development of the samples and the optical microscopy have been done too. A Zeiss Axio Imager microscope is available (equipped with 5 objective lenses, 4 different contrast methods, transmitted or reflected light illumination). Fig. 2. shows a typical example of the Atomki logo. This is a bright field image, a number of different nice and colourful images can be produced with the other contrast techniques (for more images see the Institute website: http://www.atomki.hu/ ). (author)

  4. Micromachined electrostatically suspended gyroscope with a spinning ring-shaped rotor

    Science.gov (United States)

    Han, F. T.; Liu, Y. F.; Wang, L.; Ma, G. Y.

    2012-10-01

    A micromachined electrostatically suspended gyroscope is described in this paper, in which a spinning ring-shaped rotor is suspended by an electric bearing in five degrees of freedom and driven by a three-phase variable-capacitance motor. The electric bearing provides contactless suspension of the spinning rotor, allowing the rotor through a torque-rebalance loop to precess about two input axes that are orthogonal to the spin axis. In this way, the micromachined spinning-rotor gyroscope can be used as a two-degree-of-freedom angular rate sensor by detecting the precession-induced torque. Design and simulation of the dual-axis torque-rebalance loop, by considering actual negative spring effect in rotor dynamics, are presented to investigate the loop stability and explain the experimental measurement. The prototype device has been fabricated by bulk micromachining technique and tested successfully with a suspended rotor spinning at a speed of 10 085 rpm. Initial measurements of the rate gyroscope shows that an input range of ±100° s-1, a noise floor of 0.015° s-1 Hz-1/2, and a bias stability of 50.95° h-1 have been achieved. The detailed results of the prototype device, electric bearing and motor spin-up are also described.

  5. Ultrasonic transducer

    International Nuclear Information System (INIS)

    A description is given of an ultrasonic transducer capable of operating at high temperature and comprising a transducer crystal and a coupling piece. This coupling piece is composed of several thin plates, generally triangular in shape, in a material withstanding corrosion and high temperatures, these plates being applied one against the other by pressure. One of the edges of the coupling piece is designed so as to direct towards the junction surfaces of the various plates the ultrasonic waves reflected from the junction between the coupling piece and the piece to which the ultrasonic waves must be transmitted

  6. System for Measuring Capacitance

    Science.gov (United States)

    McNichol, Randal S. (Inventor)

    2001-01-01

    A system has been developed for detecting the level of a liquid in a tank wherein a capacitor positioned in the tank has spaced plates which are positioned such that the dielectric between the plates will be either air or the liquid, depending on the depth of the liquid in the tank. An oscillator supplies a sine wave current to the capacitor and a coaxial cable connects the capacitor to a measuring circuit outside the tank. If the cable is very long or the capacitance to be measured is low, the capacitance inherent in the coaxial cable will prevent an accurate reading. To avoid this problem, an inductor is connected across the cable to form with the capacitance of the cable a parallel resonant circuit. The impedance of the parallel resonant circuit is infinite, so that attenuation of the measurement signal by the stray cable capacitance is avoided.

  7. Capacitance pressure sensor

    Science.gov (United States)

    Eaton, William P.; Staple, Bevan D.; Smith, James H.

    2000-01-01

    A microelectromechanical (MEM) capacitance pressure sensor integrated with electronic circuitry on a common substrate and a method for forming such a device are disclosed. The MEM capacitance pressure sensor includes a capacitance pressure sensor formed at least partially in a cavity etched below the surface of a silicon substrate and adjacent circuitry (CMOS, BiCMOS, or bipolar circuitry) formed on the substrate. By forming the capacitance pressure sensor in the cavity, the substrate can be planarized (e.g. by chemical-mechanical polishing) so that a standard set of integrated circuit processing steps can be used to form the electronic circuitry (e.g. using an aluminum or aluminum-alloy interconnect metallization).

  8. Capacitive chemical sensor

    Science.gov (United States)

    Manginell, Ronald P; Moorman, Matthew W; Wheeler, David R

    2014-05-27

    A microfabricated capacitive chemical sensor can be used as an autonomous chemical sensor or as an analyte-sensitive chemical preconcentrator in a larger microanalytical system. The capacitive chemical sensor detects changes in sensing film dielectric properties, such as the dielectric constant, conductivity, or dimensionality. These changes result from the interaction of a target analyte with the sensing film. This capability provides a low-power, self-heating chemical sensor suitable for remote and unattended sensing applications. The capacitive chemical sensor also enables a smart, analyte-sensitive chemical preconcentrator. After sorption of the sample by the sensing film, the film can be rapidly heated to release the sample for further analysis. Therefore, the capacitive chemical sensor can optimize the sample collection time prior to release to enable the rapid and accurate analysis of analytes by a microanalytical system.

  9. Aviation-oriented Micromachining Technology-Micro-ECM in Pure Water

    Institute of Scientific and Technical Information of China (English)

    Bao Huaiqian; Xu Jiawen; Li Ying

    2008-01-01

    This article proposes a precise and ecofriendly micromachining technology for aerospace application called electrochemical machining in pure water (PW-ECM). On the basis of the principles of water dissociation, a series of test setups and tests are devised and performed under different conditions. These tests explain the need for technological conditions realizing PW-ECM, and further explore the technological principles. The results from the tests demonstrate a successful removal of electrolytic slime by means of ultrasonic vibration of the workpiece. To ensure the stability and reliability of PW-ECM process, a new combined rnachining method of PW-ECM assisted with ultrasonic vibration (PW-ECM/USV) is devised. Trilateral and square cavities and holes as well as a group of English alphabets are worked out on a stainless steel plate. It is eonfirmed that PW-ECM will be probably an efficient new aviation precision machining method.

  10. Physics-based signal processing algorithms for micromachined cantilever arrays

    Science.gov (United States)

    Candy, James V; Clague, David S; Lee, Christopher L; Rudd, Robert E; Burnham, Alan K; Tringe, Joseph W

    2013-11-19

    A method of using physics-based signal processing algorithms for micromachined cantilever arrays. The methods utilize deflection of a micromachined cantilever that represents the chemical, biological, or physical element being detected. One embodiment of the method comprises the steps of modeling the deflection of the micromachined cantilever producing a deflection model, sensing the deflection of the micromachined cantilever and producing a signal representing the deflection, and comparing the signal representing the deflection with the deflection model.

  11. Induced Charge Capacitive Deionization

    OpenAIRE

    Rubin, S.; Suss, M. E.; Biesheuvel, P. M.; Bercovici, M.

    2016-01-01

    We demonstrate the phenomenon of induced-charge capacitive deionization (ICCDI) that occurs around a porous and conducting particle immersed in an electrolyte, under the action of an external electrostatic field. The external electric field induces an electric dipole in the porous particle, leading to capacitive charging of its volume by both cations and anions at opposite poles. This regime is characterized both by a large RC charging time and a small electrochemical charge relaxation time, ...

  12. Nonlinear Quantum Capacitance

    OpenAIRE

    Wang, B; Zhao, X; Guo, H; Wang, J.

    1999-01-01

    We analyze the nonlinear voltage dependence of electrochemical capacitance for nanoscale conductors. This voltage dependence is due to the finite density of states of the conductors. Within Hartree theory we derive an exact expression for the electrochemical capacitance–voltage curve for a parallel plate system. The result suggests a quantum scanning capacitance microscopy at the nanoscale: by inverting the capacitance–voltage expression one is able to deduce the local spectral function of th...

  13. Demonstration of superconducting micromachined cavities

    International Nuclear Information System (INIS)

    Superconducting enclosures will be key components of scalable quantum computing devices based on circuit quantum electrodynamics. Within a densely integrated device, they can protect qubits from noise and serve as quantum memory units. Whether constructed by machining bulk pieces of metal or microfabricating wafers, 3D enclosures are typically assembled from two or more parts. The resulting seams potentially dissipate crossing currents and limit performance. In this letter, we present measured quality factors of superconducting cavity resonators of several materials, dimensions, and seam locations. We observe that superconducting indium can be a low-loss RF conductor and form low-loss seams. Leveraging this, we create a superconducting micromachined resonator with indium that has a quality factor of two million, despite a greatly reduced mode volume. Inter-layer coupling to this type of resonator is achieved by an aperture located under a planar transmission line. The described techniques demonstrate a proof-of-principle for multilayer microwave integrated quantum circuits for scalable quantum computing

  14. Micromachining for laser fusion pellet

    International Nuclear Information System (INIS)

    In laser nuclear fusion, the fusion reaction is induced by irradiating powerful laser beam on the pellets filled with fuel, and compressing and heating the fuel by implosion. At this time, in order to compress it up to high density, it is very important to compress as the spherical symmetry is maintained. The uniformity of the sphericity and wall thickness is required to be more than 98 %. Besides, in order to heighten the efficiency, it is necessary to limit the temperature of main fuel low, to ignite with hot sparks at the center, and to burn remaining fuel with the alpha particles which are generated by the nuclear fusion reaction there. For this purpose, various target structures have been proposed. The cryogenic target for ablative compression, the double shell target and the cannonball target are shown. In order to produce these targets, the development of the fuel spheres which have high uniformity and good sphericity in the required size, the development of the coating process with good surface finish which can do uniform coating at the rate of about 10 μm/h, the development of micromachining technology, the development of cryogenic technology and so on are necessary. Also the levitation of pellets by magnetic suspension method is explained. (K.I.)

  15. Demonstration of superconducting micromachined cavities

    Energy Technology Data Exchange (ETDEWEB)

    Brecht, T., E-mail: teresa.brecht@yale.edu; Reagor, M.; Chu, Y.; Pfaff, W.; Wang, C.; Frunzio, L.; Devoret, M. H.; Schoelkopf, R. J. [Department of Applied Physics, Yale University, New Haven, Connecticut 06511 (United States)

    2015-11-09

    Superconducting enclosures will be key components of scalable quantum computing devices based on circuit quantum electrodynamics. Within a densely integrated device, they can protect qubits from noise and serve as quantum memory units. Whether constructed by machining bulk pieces of metal or microfabricating wafers, 3D enclosures are typically assembled from two or more parts. The resulting seams potentially dissipate crossing currents and limit performance. In this letter, we present measured quality factors of superconducting cavity resonators of several materials, dimensions, and seam locations. We observe that superconducting indium can be a low-loss RF conductor and form low-loss seams. Leveraging this, we create a superconducting micromachined resonator with indium that has a quality factor of two million, despite a greatly reduced mode volume. Inter-layer coupling to this type of resonator is achieved by an aperture located under a planar transmission line. The described techniques demonstrate a proof-of-principle for multilayer microwave integrated quantum circuits for scalable quantum computing.

  16. Demonstration of superconducting micromachined cavities

    Science.gov (United States)

    Brecht, T.; Reagor, M.; Chu, Y.; Pfaff, W.; Wang, C.; Frunzio, L.; Devoret, M. H.; Schoelkopf, R. J.

    2015-11-01

    Superconducting enclosures will be key components of scalable quantum computing devices based on circuit quantum electrodynamics. Within a densely integrated device, they can protect qubits from noise and serve as quantum memory units. Whether constructed by machining bulk pieces of metal or microfabricating wafers, 3D enclosures are typically assembled from two or more parts. The resulting seams potentially dissipate crossing currents and limit performance. In this letter, we present measured quality factors of superconducting cavity resonators of several materials, dimensions, and seam locations. We observe that superconducting indium can be a low-loss RF conductor and form low-loss seams. Leveraging this, we create a superconducting micromachined resonator with indium that has a quality factor of two million, despite a greatly reduced mode volume. Inter-layer coupling to this type of resonator is achieved by an aperture located under a planar transmission line. The described techniques demonstrate a proof-of-principle for multilayer microwave integrated quantum circuits for scalable quantum computing.

  17. Quantum capacitance: a microscopic derivation

    OpenAIRE

    Mukherjee, Sreemoyee; MANNINEN, M; Deo, P. Singha

    2010-01-01

    We start from microscopic approach to many body physics and show the analytical steps and approximations required to arrive at the concept of quantum capacitance. These approximations are valid only in the semi-classical limit and the quantum capacitance in that case is determined by Lindhard function. The effective capacitance is the geometrical capacitance and the quantum capacitance in series, and this too is established starting from a microscopic theory.

  18. Ultrasonic mammography

    International Nuclear Information System (INIS)

    608 women are examined by means of ultrasonic mammography during the period of 1 year. 432 patients were examined with the compound method with the U.I. Octoson, a water tank scanner, and 176 patients with the real time method with a directly connected linear-array-scanner. The following results were obtained at the end of the examination period: In the ultrasonic and also in the X-ray mammogram tumour diameters can be determined with an error rate of +- 30%. In the diagnosing of carcinomas, a significant dependence of the exactness on the sice of the tumour is found for the combination of the five methods tested (clinical examination, X-ray mammography, ultrasonic mammography, thermography, cytology). Classifying the individual methods with regard to their exactness, X-ray mammography ranks in front of ultrasonic mammography. Mastopathic changes in the breast can be screened by means of ultrasonic mammography. The structure of the changes can be determined more exactly than with an X-ray picture which is due to the possibility of differentiating solid and cystic structures. In diagnosing fibro-adenomas and establishing diagnoses on young women with dense gland bodies, ultrasonic mammography is superior to radiology both in the ability of screening a finding of a fibro-adenoma (US=88%, X-ray=75%) and in the possibility of classifying it as ''more benign than malignant''. (orig./MG)

  19. Silicon Micromachining for Terahertz Component Development

    Science.gov (United States)

    Chattopadhyay, Goutam; Reck, Theodore J.; Jung-Kubiak, Cecile; Siles, Jose V.; Lee, Choonsup; Lin, Robert; Mehdi, Imran

    2013-01-01

    Waveguide component technology at terahertz frequencies has come of age in recent years. Essential components such as ortho-mode transducers (OMT), quadrature hybrids, filters, and others for high performance system development were either impossible to build or too difficult to fabricate with traditional machining techniques. With micromachining of silicon wafers coated with sputtered gold it is now possible to fabricate and test these waveguide components. Using a highly optimized Deep Reactive Ion Etching (DRIE) process, we are now able to fabricate silicon micromachined waveguide structures working beyond 1 THz. In this paper, we describe in detail our approach of design, fabrication, and measurement of silicon micromachined waveguide components and report the results of a 1 THz canonical E-plane filter.

  20. Optical measurement of micromachine engine performance

    Energy Technology Data Exchange (ETDEWEB)

    Holswade, S.C.; Dickey, F.M.

    1997-08-01

    Understanding the mechanisms that impact the performance of Microelectromechanical Systems (MEMS) is essential to the development of optimized designs and drive signals, as well as the qualification of devices for commercial applications. Silicon micromachines include engines that consist of orthogonally oriented linear comb drive actuators mechanically connected to a rotating gear. These gears are as small as 50 {mu}m in diameter and can be driven at rotation rates exceeding 300,000 rpm. Optical techniques offer the potential for measuring long term statistical performance data and transient responses needed to optimize designs and manufacturing techniques. The authors describe the development of Micromachine Optical Probe (MOP) technology for the evaluation of micromachine performance. The MOP approach is based on the detection of optical signals scattered by the gear teeth or other physical structures. They present experimental results for a prototype system designed to measure engine parameters as well as long term performance data.

  1. Photolithographic surface micromachining of polydimethylsiloxane (PDMS).

    Science.gov (United States)

    Chen, Weiqiang; Lam, Raymond H W; Fu, Jianping

    2012-01-21

    A major technical hurdle in microfluidics is the difficulty in achieving high fidelity lithographic patterning on polydimethylsiloxane (PDMS). Here, we report a simple yet highly precise and repeatable PDMS surface micromachining method using direct photolithography followed by reactive ion etching (RIE). Our method to achieve surface patterning of PDMS applied an O(2) plasma treatment to PDMS to activate its surface to overcome the challenge of poor photoresist adhesion on PDMS for photolithography. Our photolithographic PDMS surface micromachining technique is compatible with conventional soft lithography techniques and other silicon-based surface and bulk micromachining methods. To illustrate the general application of our method, we demonstrated fabrication of large microfiltration membranes and free-standing beam structures in PDMS. PMID:22089984

  2. Cryogenically assisted abrasive jet micromachining of polymers

    International Nuclear Information System (INIS)

    The abrasive jet micromachining (AJM) of elastomers and polymers such as polydimethylsiloxane (PDMS), acrylonitrile butadiene styrene (ABS) and polytetrafluoroethylene (PTFE) for use in micro-fluidic devices was found to be very slow or impossible at room temperature. To enhance the material removal rate in such materials, a stream of liquid nitrogen (LN2) was injected into the abrasive jet, cooling the target to cryogenic temperatures. Erosion rate measurements on the three polymeric materials (PDMS, ABS and PTFE) with and without the use of LN2 were compared along with the profiles of micromachined channels and holes. It was found that the use of LN2 cooling caused brittle erosion in PDMS, allowing it to be micromachined successfully. An erosion rate increase was also observed in PTFE and ABS at high and intermediate impact angles. The use of LN2 also was found to reduce particle embedding

  3. Acoustic generation of femtoliter to picoliter droplets using two-dimensional micromachined microdroplet ejector arrays

    Science.gov (United States)

    Demirci, Utkan

    There is growing demand in the fields of semiconductor manufacturing and biotechnology to reliably generate repeatable, uniform, picoliter-size fluid droplets. Such droplets can be generated using MEMS (Micro-Electro-Mechanical Systems) technology. We propose 2-D micromachined microdroplet ejector arrays for environmentally benign deposition of photoresist and other spin-on materials, such as low-k and high-k dielectrics used in integrated circuit (IC) manufacturing. Direct deposition of these chemicals will reduce waste and production cost. These ejectors are chemically compatible with the materials used in IC manufacturing, and do not harm fluids that are heat or pressure sensitive. Moreover, these ejectors are attractive to biomedicine and biotechnology for droplet generation in applications such as printing of DNA or protein assays and drug testing. Two novel methods for generating millions of droplets per second using acoustically actuated 2-D micromachined microdroplet ejector arrays will be presented. First, membrane based 2-D micromachined ejector arrays will be introduced. Each element of a membrane based 2-D ejector array consists of a flexurally vibrating circular membrane on one face of a cylindrical fluid reservoir. The membrane has an orifice at the center. A piezoelectric transducer generating ultrasonic waves, located at the open face of the reservoir, actuates the membrane and droplets are ejected through the membrane orifice. The ejectors operated most efficiently at 1.2 MHz and generated 3--7 mum diameter droplets. Second, acoustic focus based 2-D micromachined ejector arrays will be demonstrated. The radiation pressure associated with the acoustic beam overcomes the surface tension force, and releases droplets into air in every actuation cycle. The ejectors operated most efficiently at 34.7 MHz, and generated 28 mum diameter droplets in both drop-on-demand and continuous modes of operation, as predicted by the finite element analysis

  4. Tribological issues of polysilicon surface-micromachining

    Energy Technology Data Exchange (ETDEWEB)

    Sniegowski, J.J.

    1997-12-01

    Polysilicon surface-micromachining is a Micro-Electro-Mechanical Systems (MEMS) manufacturing technology where the infrastructure for manufacturing silicon integrated circuits is used to fabricate micro-miniature mechanical devices. This presentation describes a multi-level mechanical polysilicon surface-micromachining technology and includes a discussion of the issues which affect device manufacture and performance. The multi-level technology was developed and is employed primarily to fabricate microactuated mechanisms. The intricate and complex motion offered by these devices is naturally accompanied by various forms of fraction and wear in addition to the classical stiction phenomena associated with micromechanical device fabrication and usage.

  5. Design and Fabrication of Micromachined Resonators

    CERN Document Server

    Chaudhuri, Ritesh Ray; Bhattacharyya, Tarun Kanti

    2012-01-01

    Microelectromechanical system (MEMS) based on-chip resonators offer great potential for sensing and high frequency signal processing applications due to their exceptional features like small size, large frequency-quality factor product, integrability with CMOS ICs, low power consumption etc. This work is mainly aimed at the design, modeling, simulation, and fabrication of micromachined polysilicon disk resonators exhibiting radial-contour mode vibrations. A few other bulk mode modified resonator geometries are also being explored. The resonator structures have been designed and simulated in CoventorWare finite-element platform and fabricated by the PolyMUMPs surface micromachining process.

  6. Fundamental mechanisms of micromachine reliability

    Energy Technology Data Exchange (ETDEWEB)

    DE BOER,MAARTEN P.; SNIEGOWSKI,JEFFRY J.; KNAPP,JAMES A.; REDMOND,JAMES M.; MICHALSKE,TERRY A.; MAYER,THOMAS K.

    2000-01-01

    Due to extreme surface to volume ratios, adhesion and friction are critical properties for reliability of Microelectromechanical Systems (MEMS), but are not well understood. In this LDRD the authors established test structures, metrology and numerical modeling to conduct studies on adhesion and friction in MEMS. They then concentrated on measuring the effect of environment on MEMS adhesion. Polycrystalline silicon (polysilicon) is the primary material of interest in MEMS because of its integrated circuit process compatibility, low stress, high strength and conformal deposition nature. A plethora of useful micromachined device concepts have been demonstrated using Sandia National Laboratories' sophisticated in-house capabilities. One drawback to polysilicon is that in air the surface oxidizes, is high energy and is hydrophilic (i.e., it wets easily). This can lead to catastrophic failure because surface forces can cause MEMS parts that are brought into contact to adhere rather than perform their intended function. A fundamental concern is how environmental constituents such as water will affect adhesion energies in MEMS. The authors first demonstrated an accurate method to measure adhesion as reported in Chapter 1. In Chapter 2 through 5, they then studied the effect of water on adhesion depending on the surface condition (hydrophilic or hydrophobic). As described in Chapter 2, they find that adhesion energy of hydrophilic MEMS surfaces is high and increases exponentially with relative humidity (RH). Surface roughness is the controlling mechanism for this relationship. Adhesion can be reduced by several orders of magnitude by silane coupling agents applied via solution processing. They decrease the surface energy and render the surface hydrophobic (i.e. does not wet easily). However, only a molecular monolayer coats the surface. In Chapters 3-5 the authors map out the extent to which the monolayer reduces adhesion versus RH. They find that adhesion is

  7. The Development of Micromachined Gyroscope Structure and Circuitry Technology

    Directory of Open Access Journals (Sweden)

    Dunzhu Xia

    2014-01-01

    Full Text Available This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs, piezoelectric vibrating gyroscopes (PVGs, surface acoustic wave (SAW gyroscopes, bulk acoustic wave (BAW gyroscopes, micromachined electrostatically suspended gyroscopes (MESGs, magnetically suspended gyroscopes (MSGs, micro fiber optic gyroscopes (MFOGs, micro fluid gyroscopes (MFGs, micro atom gyroscopes (MAGs, and special micromachined gyroscopes. Next, the control electronics of micromachined gyroscopes are analyzed. The control circuits are categorized into typical circuitry and special circuitry technologies. The typical circuitry technologies include typical analog circuitry and digital circuitry, while the special circuitry consists of sigma delta, mode matching, temperature/quadrature compensation and novel special technologies. Finally, the characteristics of various typical gyroscopes and their development tendency are discussed and investigated in detail.

  8. Ultrasonic neuromodulation

    Science.gov (United States)

    Naor, Omer; Krupa, Steve; Shoham, Shy

    2016-06-01

    Ultrasonic waves can be non-invasively steered and focused into mm-scale regions across the human body and brain, and their application in generating controlled artificial modulation of neuronal activity could therefore potentially have profound implications for neural science and engineering. Ultrasonic neuro-modulation phenomena were experimentally observed and studied for nearly a century, with recent discoveries on direct neural excitation and suppression sparking a new wave of investigations in models ranging from rodents to humans. In this paper we review the physics, engineering and scientific aspects of ultrasonic fields, their control in both space and time, and their effect on neuronal activity, including a survey of both the field’s foundational history and of recent findings. We describe key constraints encountered in this field, as well as key engineering systems developed to surmount them. In closing, the state of the art is discussed, with an emphasis on emerging research and clinical directions.

  9. 38 GHz Antennas on Micromachined Silicon Substrates.

    OpenAIRE

    Marcelli, Romolo; Dragoman, M.; Neculoiu, Dan; Giacomozzi, Flavio; Muller, Alexandru; Nitescu, N.

    2001-01-01

    A new configuration of a double folded double slot CPW feed micromachined antenna array was realized on a 1.5 µm thin three-layer dielectric membrane fabricated on a silicon substrate. The antenna was designed for an operating frequency of 38 GHz, and the double folded configuration was used for minimizing the membrane extension.

  10. Electrostatic actuators fabricated by surface micromachining techniques

    OpenAIRE

    Legtenberg, Rob

    1996-01-01

    This thesis deals with "electrostatic actuators fabricated by surface micromachining techniques". It presents fabrication techniques, design issues, modelling and performance characteristics of a number of electrostatic actuators. These actuators can be used in future micromechanical devices and systems which have applications such as micropositioning, microfluidics, microsurgery etc.

  11. Membrane capacitive deionization

    NARCIS (Netherlands)

    Biesheuvel, P.M.; Wal, van der A.

    2010-01-01

    Membrane capacitive deionization (MCDI) is an ion-removal process based on applying an electrical potential difference across an aqueous solution which flows in between oppositely placed porous electrodes, in front of which ion-exchange membranes are positioned. Due to the applied potential, ions ar

  12. Steerable Capacitive Proximity Sensor

    Science.gov (United States)

    Jenstrom, Del T.; Mcconnell, Robert L.

    1994-01-01

    Steerable capacitive proximity sensor of "capaciflector" type based partly on sensing units described in GSC-13377 and GSC-13475. Position of maximum sensitivity adjusted without moving sensor. Voltage of each driven shield adjusted separately to concentrate sensing electric field more toward one side or other.

  13. Digital capacitance measuring system

    Science.gov (United States)

    1973-01-01

    The hardware phase of a digital capacitance measuring system is presented with the major emphasis placed on the electrical design and operation. Test results are included of the three units fabricated. The system's interface is applicable to existing requirements for the space shuttle vehicle.

  14. Ultrasonic transducer

    International Nuclear Information System (INIS)

    An ultrasonic transducer suitable for use up to a temperature of about 6000C comprises a stainless steel casing containing a lithium niobate piezoelectric element and a backing material of a powder which provides a partial pressure of oxygen and thereby prevents deterioration of the element by oxygen loss or contamination. The powder might be of lithium niobate or magnesia. (author)

  15. Ultrasonic transducer

    International Nuclear Information System (INIS)

    The invention concerns an ultrasonic piezoelectric transducer fitted in sealed boxes for use in liquid sodium cooled fast nuclear reactors. These transducers are immersed in the sodium. The box is so constructed that its enables a removable connexion to be made between the transducer box itself and the connector

  16. Calculating and optimizing inter-electrode capacitances of charge division microchannel plate detectors

    Science.gov (United States)

    Xing, Yan; Chen, Bo; Zhang, Hong-Ji; Wang, Hai-Feng; He, Ling-Ping; Jin, Fang-Yuan

    2016-04-01

    Based on the principle of charge division microchannel plate detectors, the inter-electrode capacitances of charge division anodes which are related to electronic noise of the charge sensitive amplifier and crosstalk effect of the anode are presented. Under all the requirements of charge division microchannel plate detectors such as the imaging linearity and spatial resolution, decreasing the inter-electrode capacitances is one way to improve the imaging performance. In this paper, we illustrate the simulation process of calculating the inter-electrode capacitances. Moreover, a Wedge and Strip (WSZ) anode is fabricated with the picosecond laser micromachining process. Comparing the simulated capacitances and measured capacitances, the three-dimensional finite element method is proved to be valid. Furthermore, by adjusting the design parameters of the anode, the effects of the substrate permittivity, insulation width and the size of pitch on the inter-electrode capacitances have been analysed. The structure of the charge division anode has been optimized based on the simulation data.

  17. Focused high energy proton beam micromachining: A perspective view

    International Nuclear Information System (INIS)

    Micromachining techniques utilising optical, UV and X-ray photons, as well as electrons, low energy heavy ions and high energy light ions (protons), are briefly reviewed. The advantages and disadvantages of each process are discussed. High energy ion beam micromachining (proton micromachining) is a new process which exhibits a unique feature; direct-write 3-dimensional micromachining at submicron resolutions. Although this technique may not compete with conventional mask processes for producing high volume batch production of microcomponents, high energy ion beam micromachining may have a significant role in rapid prototyping, research into the characteristics of microstructures, and the manufacture of molds, stamps and thick masks. Several examples of high energy proton micromachining are presented to illustrate the potential of the technique

  18. Femtosecond laser waveguide micromachining of PMMA films with azoaromatic chromophores.

    Science.gov (United States)

    Mendonca, C R; Cerami, L R; Shih, T; Tilghman, R W; Baldacchini, T; Mazur, E

    2008-01-01

    We report on the femtosecond-laser micromachining of poly(methyl methacrylate) (PMMA) films doped with nonlinear azoaromatic chromophores: Disperse Red 1, Disperse Red 13 and Disperse Orange 3. We study the conditions for controlling chromophore degradation during the micromachining of PMMA doped with each chromophore. Furthermore, we successfully used fs-micromachining to fabricate optical waveguides within a bulk sample of PMMA doped with these azochromophores. PMID:18521148

  19. Micromachining – Review of Literature from 1980 to 2010

    Directory of Open Access Journals (Sweden)

    Zdenka Keran

    2014-01-01

    Full Text Available Trend of miniaturization of products and consequently its components nowadays can be evident in almost every production field. To accomplish requirements imposed by miniaturization micromachining proved to be a satisfied manufacturing technique. Herein the term micromachining refers to mechanical micro cutting techniques where material is removed by geometrically determined cutting edges. The aim of this review article is to summarize existing knowledge and highlight current challenges, restrictions and advantages in the field of micromachining.

  20. Induced Charge Capacitive Deionization

    CERN Document Server

    Rubin, S; Biesheuvel, P M; Bercovici, M

    2016-01-01

    We demonstrate the phenomenon of induced-charge capacitive deionization (ICCDI) that occurs around a porous and conducting particle immersed in an electrolyte, under the action of an external electrostatic field. The external electric field induces an electric dipole in the porous particle, leading to capacitive charging of its volume by both cations and anions at opposite poles. This regime is characterized both by a large RC charging time and a small electrochemical charge relaxation time, which leads to rapid and significant deionization of ionic species from a volume which is on the scale of the particle. We show by theory and experiment that the transient response around a cylindrical particle results in spatially non-uniform charging and non-steady growth of depletion regions which emerge around the particle's poles. Potentially, ICCDI can be useful in applications where fast concentration changes of ionic species are required over large volumes.

  1. Molecular Aspects of Capacitation

    OpenAIRE

    Gulfidan Zulfikaroglu; Hulya Ozgur; Sait Polaturkey

    2010-01-01

    Male and female gamets are derived from the primordial germ cells, which migrate from the wall of the yolk sac toward the developing gonads. Following a series of mitotic divisions these cells increase in number at the gonads. The primordial germ cells differentiate into spermatogonia and take the form of mature spermatozoa after spermotogensis and spermotogenesis at puberty. Capacitation is the reaction, which includes all of the molecular and physiological events of mature sperm to gain the...

  2. Capacitance of graphene nanoribbons

    OpenAIRE

    Shylau, A. A.; Klos, J. W.; Zozoulenko, I. V.

    2009-01-01

    We present an analytical theory for the gate electrostatics and the classical and quantum capacitance of the graphene nanoribbons (GNRs) and compare it with the exact self-consistent numerical calculations based on the tight-binding p-orbital Hamiltonian within the Hartree approximation. We demonstrate that the analytical theory is in a good qualitative (and in some aspects quantitative) agreement with the exact calculations. There are however some important discrepancies. In order to underst...

  3. Model Design of Piezoelectric Micromachined Modal Gyroscope

    Directory of Open Access Journals (Sweden)

    Xiaojun Hu

    2011-01-01

    Full Text Available This paper reports a novel kind of solid-state microgyroscope, which is called piezoelectric micromachined modal gyroscope (PMMG. PMMG has large stiffness and robust resistance to shake and strike because there is no evident mass-spring component in its structure. This work focused on quantitative optimization of the gyroscope, which is still blank for such gyroscope. The modal analysis by the finite element method (FEM was firstly conducted. A set of quantitative indicators were developed to optimize the operation mode. By FEM, the harmonic analysis was conducted to find the way to efficiently actuate the operational mode needed. The optimal configuration of driving electrodes was obtained. At last, the Coriolis analysis was conducted to show the relation between angular velocity and differential output voltage by the Coriolis force under working condition. The results obtained in this paper provide theoretical basis for realizing this novel kind of micromachined gyroscope.

  4. Micromachined Inclinometer Based on Fluid Convection

    CERN Document Server

    Crespy, N; Combette, P; Boyer, P Temple; Giani, A; Foucaran, A

    2008-01-01

    This paper presents a numerical simulation and experimental results of a one-dimensional thermal inclinometer with the cavity filled of gas and liquid. The sensor principle consists of one heating resistor placed between two detectors. When the resistor is electrically powered, it creates a symmetrical temperature profile inside a micromachined silicon cavity. By applying a tilt to the sensor, the profile shifts in the same direction of the sensible axis corresponding to the horizontal one to one. The temperature profile and the sensitivity according to the CO2 gas and mineral oil SAE50 have been studied using numerical resolution of fluid dynamics equations with the computational fluid dynamics (CFD) software package Fluent V6.2. We have shown that the sensitivity of liquid sensors is higher than the gas sensors one. By using micromachined silicon technique, a thermal inclinometer with one pair of detectors placed at 300 um from the heater has been made. Experimental measurements corroborate with the numeric...

  5. Micro benchtop optics by bulk silicon micromachining

    Science.gov (United States)

    Lee, Abraham P.; Pocha, Michael D.; McConaghy, Charles F.; Deri, Robert J.

    2000-01-01

    Micromachining of bulk silicon utilizing the parallel etching characteristics of bulk silicon and integrating the parallel etch planes of silicon with silicon wafer bonding and impurity doping, enables the fabrication of on-chip optics with in situ aligned etched grooves for optical fibers, micro-lenses, photodiodes, and laser diodes. Other optical components that can be microfabricated and integrated include semi-transparent beam splitters, micro-optical scanners, pinholes, optical gratings, micro-optical filters, etc. Micromachining of bulk silicon utilizing the parallel etching characteristics thereof can be utilized to develop miniaturization of bio-instrumentation such as wavelength monitoring by fluorescence spectrometers, and other miniaturized optical systems such as Fabry-Perot interferometry for filtering of wavelengths, tunable cavity lasers, micro-holography modules, and wavelength splitters for optical communication systems.

  6. Electrical capacitance clearanceometer

    Science.gov (United States)

    Hester, Norbert J. (Inventor); Hornbeck, Charles E. (Inventor); Young, Joseph C. (Inventor)

    1992-01-01

    A hot gas turbine engine capacitive probe clearanceometer is employed to measure the clearance gap or distance between blade tips on a rotor wheel and its confining casing under operating conditions. A braze sealed tip of the probe carries a capacitor electrode which is electrically connected to an electrical inductor within the probe which is inserted into a turbine casing to position its electrode at the inner surface of the casing. Electrical power is supplied through a voltage controlled variable frequency oscillator having a tuned circuit in which the probe is a component. The oscillator signal is modulated by a change in electrical capacitance between the probe electrode and a passing blade tip surface while an automatic feedback correction circuit corrects oscillator signal drift. A change in distance between a blade tip and the probe electrode is a change in capacitance therebetween which frequency modulates the oscillator signal. The modulated oscillator signal which is then processed through a phase detector and related circuitry to provide an electrical signal is proportional to the clearance gap.

  7. Micromachined Piezoelectric Actuators for Cryogenic Adaptive Optics Project

    Data.gov (United States)

    National Aeronautics and Space Administration — TRS Technologies proposes micromachined single crystal piezoelectric actuator arrays to enable ultra-large stroke, high precision shape control for large aperture,...

  8. Micromachined Parts Advance Medicine, Astrophysics, and More

    Science.gov (United States)

    2015-01-01

    In the mid-1990s, Marshall Space Flight Center awarded two SBIR contracts to Potomac Photonics, now based in Baltimore, for the development of computerized workstations capable of mass-producing tiny, intricate, diffractive optical elements. While the company has since discontinued the workstations, those contracts set the stage for Potomac Photonics to be a leader in the micromachining industry, where NASA remains one of its clients.

  9. Micromachined Horn Antenna Operating at 75 GHz

    OpenAIRE

    Grzegorczyk, Tomasz M.; Zurcher, Jean-François; Renaud, Philippe; Mosig, Juan R.

    2000-01-01

    We propose in this paper an integrated cavity-backed horn antenna, generalizing the well-known SSFIP (Strip-Slot-Foam-Inverted Patch) design, operating at 75 GHz. The antenna was optimized using a full-wave software and realized using micromachining technologies. The proposed structure can be used for high radiation ef-ficiency antennas and arrays in the millimeter-wave band, since surface waves are inherently suppressed by the use of a metallic horn and a cavity configuration.

  10. Surface micromachining of unfired ceramic sheets

    OpenAIRE

    Rheaume, Jonathan M.; Pisano, Albert P.

    2011-01-01

    Conventional surface micromachining techniques including photolithography and both wet and dry etching have been directly applied to an unfired sheet of yttria-stabilized zirconia ceramic material. Reversible bonding methods were investigated for affixing unfired ceramic samples to silicon handle wafers in order to perform photolithography. Three types of photoresist were investigated. Thin film photoresist allowed a line-width feature size of 8 μm to be obtained. Thick film photoresist exhib...

  11. A Surface Micromachined CMOS MEMS Humidity Sensor

    Directory of Open Access Journals (Sweden)

    Jian-Qiu Huang

    2015-10-01

    Full Text Available This paper reports a CMOS MEMS (complementary metal oxide semiconductor micro electromechanical system piezoresistive humidity sensor fabricated by a surface micromachining process. Both pre-CMOS and post-CMOS technologies were used to fabricate the piezoresistive humidity sensor. Compared with a bulk micromachined humidity sensor, the machining precision and the sizes of the surface micromachined humidity sensor were both improved. The package and test systems of the sensor were designed. According to the test results, the sensitivity of the sensor was 7 mV/%RH (relative humidity and the linearity of the sensor was 1.9% at 20 °C. Both the sensitivity and linearity were not sensitive to the temperature but the curve of the output voltage shifted with the temperature. The hysteresis of the humidity sensor decreased from 3.2% RH to 1.9% RH as the temperature increased from 10 to 40 °C. The recovery time of the sensor was 85 s at room temperature (25 °C.

  12. Design of Surface Micromachined Compliant MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Joe Anthony Bradley

    2002-12-31

    The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a micro-compliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMs, most have used comb-drive actuation methods and bulk micromachining processes. This research focused on fully-compliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms.

  13. Design of Surface micromachined Compliant MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Joe Anthony Bradley

    2002-08-01

    The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a micro-compliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMS, most have used comb-drive actuation methods and bulk micromachining processes. This research focuses on fully-compliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms.

  14. Review of micromachining of ceramics by etching

    Institute of Scientific and Technical Information of China (English)

    H.T.TING; K.A.ABOU-EL-HOSSEIN; H.B.CHUA

    2009-01-01

    In the last two decades, there has been an enormous surge in interest in ceramic materials and, as a result, there have been significant advances in their development and applications. Their inherent properties, such as capability of operating at temperatures far above metals, high level of hardness and toughness, low coefficient of thermal expansion and high thermal conductivity rendered ceramics to be one of the leading engineering materials. Many research works have been conducted in the past few years on machining of advanced ceramics using different processing methods in order to obtain a better surface roughness, higher material removal rate and improved tool life. Micromachining using chemical etching is one of those methods that do not involve the problem of tool life and direct tool-work piece contact. However, only a few research works have been done on micromachining of ceramics using chemical etching. Hence, study of chemical machining of advanced ceramics is still needed as the process has found wide application in the industry because of its relative low operating costs. In this work, we summarize the recent progresses in machining of different types of advanced ceramics, material processing methods such as wet etching and dry etching, and finally the prospects for control of material removal rate and surface quality in the process of ceramic micromachining.

  15. Tool calibration system for micromachining system

    Science.gov (United States)

    Miller, Donald M.

    1979-03-06

    A tool calibration system including a tool calibration fixture and a tool height and offset calibration insert for calibrating the position of a tool bit in a micromachining tool system. The tool calibration fixture comprises a yokelike structure having a triangular head, a cavity in the triangular head, and a port which communicates a side of the triangular head with the cavity. Yoke arms integral with the triangular head extend along each side of a tool bar and a tool head of the micromachining tool system. The yoke arms are secured to the tool bar to place the cavity around a tool bit which may be mounted to the end of the tool head. Three linear variable differential transformer's (LVDT) are adjustably mounted in the triangular head along an X axis, a Y axis, and a Z axis. The calibration insert comprises a main base which can be mounted in the tool head of the micromachining tool system in place of a tool holder and a reference projection extending from a front surface of the main base. Reference surfaces of the calibration insert and a reference surface on a tool bar standard length are used to set the three LVDT's of the calibration fixture to the tool reference position. These positions are transferred permanently to a mastering station. The tool calibration fixture is then used to transfer the tool reference position of the mastering station to the tool bit.

  16. Experimental study of a variable-capacitance micromotor with electrostatic suspension

    International Nuclear Information System (INIS)

    A variable-capacitance micromotor where the rotor is supported electrostatically in five degrees of freedom was designed, fabricated and tested in order to study the behavior of this electrostatic motor. The micromachined device is based on a glass/silicon/glass stack bonding structure, fabricated by bulk micromachining and initially operated in atmospheric environment. The analytical torque model is obtained by calculating the capacitances between different stator electrodes and the rotor. Capacitance values in the order of 10−13 pF and torque values in the order of 10−10 N m have been calculated from the motor geometry and attainable drive voltage. A dynamic model of the motor is proposed by further estimating the air-film damping effect in an effort to explain the experimental rotation measurements. Experimental results of starting voltage, continuous operation, switching response and electric bearing of the micromotor are presented and discussed. Preliminary measurements indicate that a rotor rotating speed of 73.3 r min−1 can be achieved at a drive voltage of 28.3 V, equivalent to a theoretical motive torque of 517 pN m. Starting voltage results obtained from experimental measurement are in agreement with the developed dynamic model

  17. SYSTEM-LEVEL SIMULATION OF VIBRATORY MICROMACHINED GYROSCOPE WITH FENCE STRUCTURE

    Institute of Scientific and Technical Information of China (English)

    Che Lufeng; Xiong Bin; Wang Yuelin

    2004-01-01

    An equivalent circuit model of a novel fence structure vibratory micromachined gyroscope's oscillating properties is modeled by electrical equivalent circuits according to its dynamics equation. Equivalent circuit model of oscillating and differential detection capacitance model are implemented in the circuit simulation tool PSPICE, which is available in oscillating properties analysis such as oscillating's transient response, steady response and frequency response to angular rate to optimize working mode of the gyroscope. The model also enables sensor simulation with the interfacing electronics to analyse the performances of the whole system. Behavioral simulation of the system is performed to prove the function of detection circuits. The simulation results and measurement results show that the design of circuits is feasible.

  18. High-frequency analysis on surface micromachined on-chip transformers with stacked interwinding coil structures

    International Nuclear Information System (INIS)

    On-chip micro-transformers with a stacked interwinding coil have been developed. The transformer is fabricated using simple and cost-effective MEMS surface micromachining. High-frequency characteristics of the transformer are analyzed by comparing its performances for various coil structures and substrate materials, respectively. The results show that the RF performance of the glass-based transformer is improved compared to that of a silicon-based transformer. An analysis of various coil configuration leads to the conclusion that the metal-to-metal capacitance has a significant influence on the RF characteristics. The process fabrication of the device is simple, highlighting good prospects for future three-dimensional RF-MEMS device application

  19. Scale Factor Determination of Micro-Machined Angular Rate Sensors Without a Turntable

    Institute of Scientific and Technical Information of China (English)

    Gaisser Alexander; GAO Zhongyu; ZHOU Bin; ZHANG Rong; CHEN Zhiyong

    2006-01-01

    This paper presents a digital readout system to detect small capacitive signals of a micro-machined angular rate sensor. The flexible parameter adjustment ability and the computation speed of the digital signal processor were used to develop a new calibration procedure to determine the scale factor of a gyroscope without a turntable. The force of gravity was used to deflect the movable masses in the sensor, which resulted in a corresponding angular rate input. The gyroscope scale factor was then measured without a turntable. Test results show a maximum deviation of about 1.2% with respect to the scale factor determined on a turntable with the accuracy independent of the manufacturing process and property variations. The calibration method in combination with the improved readout electronics can minimize the calibration procedure and, thus, reduce the manufacturing costs.

  20. Capacitance of circular patch resonator

    International Nuclear Information System (INIS)

    In this paper the capacitance of the circular microstrip patch resonator is computed. It is shown that the electrostatic problem can be formulated as a system of dual integral equations, and the most interesting techniques of solutions of these systems are reviewed. Some useful approximated formulas for the capacitance are derived and plots of the capacitance are finally given in a wide range of dielectric constants

  1. Capacitance of circular patch resonator

    Energy Technology Data Exchange (ETDEWEB)

    Miano, G.; Verolino, L. [Dip. di Ingegneria Elettrica, Ist. Nazionale di Fisica Nucleare, Naples (Italy); Panariello, G. [Dip. di Ingegneria Elettronica, Naples (Italy); Vaccaro, V.G. [Ist. Nazionale di Fisica Nucleare, Naples (Italy). Dipt. di Scienze Fisiche

    1995-11-01

    In this paper the capacitance of the circular microstrip patch resonator is computed. It is shown that the electrostatic problem can be formulated as a system of dual integral equations, and the most interesting techniques of solutions of these systems are reviewed. Some useful approximated formulas for the capacitance are derived and plots of the capacitance are finally given in a wide range of dielectric constants.

  2. In-fiber whispering-gallery-mode resonator fabricated by femtosecond laser micromachining.

    Science.gov (United States)

    Shi, Leilei; Zhu, Tao; Huang, Dongmei; Liu, Min; Deng, Ming; Huang, Wei

    2015-08-15

    An in-fiber whispering-gallery-mode resonator fabricated by femtosecond laser micromachining is demonstrated. The cylinder resonator cavity is fabricated by scanning the D-fiber cladding with infrared femtosecond pulses along a cylindrical trace with a radius of 25 μm and height of 20 μm. Quality factor on the order of 10(3) is achieved by smoothing the cavity surface with an ultrasonic cleaner, which is mainly limited by the surface roughness of several hundred nanometers. Resonant characteristics and polarization dependence of the proposed resonator are also studied in detail. Our method takes a step forward in the integration of whispering-gallery-mode resonators. PMID:26274656

  3. A Flexible Ultrasound Transducer Array with Micro-Machined Bulk PZT

    Directory of Open Access Journals (Sweden)

    Zhe Wang

    2015-01-01

    Full Text Available This paper proposes a novel flexible piezoelectric micro-machined ultrasound transducer, which is based on PZT and a polyimide substrate. The transducer is made on the polyimide substrate and packaged with medical polydimethylsiloxane. Instead of etching the PZT ceramic, this paper proposes a method of putting diced PZT blocks into holes on the polyimide which are pre-etched. The device works in d31 mode and the electromechanical coupling factor is 22.25%. Its flexibility, good conformal contacting with skin surfaces and proper resonant frequency make the device suitable for heart imaging. The flexible packaging ultrasound transducer also has a good waterproof performance after hundreds of ultrasonic electric tests in water. It is a promising ultrasound transducer and will be an effective supplementary ultrasound imaging method in the practical applications.

  4. Improved Capacitive Liquid Sensor

    Science.gov (United States)

    Waldman, Francis A.

    1992-01-01

    Improved capacitive sensor used to detect presence and/or measure thickness of layer of liquid. Electrical impedance or admittance of sensor measured at prescribed frequency, and thickness of liquid inferred from predetermined theoretical or experimental relationship between impedance and thickness. Sensor is basically a three-terminal device. Features interdigitated driving and sensing electrodes and peripheral coplanar ground electrode that reduces parasitic effects. Patent-pending because first to utilize ground plane as "shunting" electrode. System less expensive than infrared, microwave, or refractive-index systems. Sensor successfully evaluated in commercial production plants to characterize emulsions, slurries, and solutions.

  5. Technology and applications of micromachined silicon adaptive mirrors

    NARCIS (Netherlands)

    Vdovin, G.; Middelhoek, S.; Sarro, P.M.

    1997-01-01

    The technology of low-cost high-quality micromachined adaptive mirrors is reported. Adaptive mirrors are fabricated by combining bulk silicon micromachining with standard electronics technologies. Mirrors with tens of control channels, having RMS initial deviation from plane of the order of λ/20 and

  6. Advanced technology trend survey of micromachines in Europe; Oshu ni okeru micromachine sentan gijutsu doko chosa

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1996-02-01

    In this research survey, the development trend of micromachine technology in Europe was surveyed, development level of micromachine technology of European companies was grasped, and practical application fields of their target were investigated. Technology development level of private companies in Japan`s national projects and practical application fields of Japan`s target were arranged. Trends of micromachine technology development are compared between Japanese companies and European companies. Among micromachine technology development projects in Europe, ``8520 MUST`` is a part of the ESPRIT Project. About 40,000 companies among about 170,000 companies in whole Europe are relating to the MUST Project. The main fields include the manufacturing technology, process control of machines, technology of safety, sensor technology in environmental fields, and automotive technology. The marketing fields of application include the automobile, military technology, home automation, industrial process, medical technology, environmental technology, and games. The results can be compared with the direction of research and development in Japan. 22 figs., 8 tabs.

  7. Modern ultrasonic flowmeters

    Science.gov (United States)

    Gurevich, V. M.; Truman, S. G.

    1986-01-01

    The current status of ultrasonic flowmeters were reviewed on the basis of materials published in the Soviet Union and elsewhere. The following advantages of ultrasonic flowmeters over earlier instruments are cited. A comparative analysis is made of the design methods employed in ultrasonic flowmeters. The evolution of ultrasonic flowmetering is traced from the first generation and trends in their development are analyzed.

  8. Ultrasonic Interferometers Revisited

    Science.gov (United States)

    Greenslade, Thomas B., Jr.

    2007-01-01

    I have been tinkering with ultrasonic transducers once more. In earlier notes I reported on optics-like experiments performed with ultrasonics, described a number of ultrasonic interferometers, and showed how ultrasonic transducers can be used for Fourier analysis. This time I became interested in trying the technique of using two detectors in…

  9. A Polymer-Based Capacitive Sensing Array for Normal and Shear Force Measurement

    Directory of Open Access Journals (Sweden)

    Ming-Yuan Cheng

    2010-11-01

    Full Text Available In this work, we present the development of a polymer-based capacitive sensing array. The proposed device is capable of measuring normal and shear forces, and can be easily realized by using micromachining techniques and flexible printed circuit board (FPCB technologies. The sensing array consists of a polydimethlysiloxane (PDMS structure and a FPCB. Each shear sensing element comprises four capacitive sensing cells arranged in a 2 × 2 array, and each capacitive sensing cell has two sensing electrodes and a common floating electrode. The sensing electrodes as well as the metal interconnect for signal scanning are implemented on the FPCB, while the floating electrodes are patterned on the PDMS structure. This design can effectively reduce the complexity of the capacitive structures, and thus makes the device highly manufacturable. The characteristics of the devices with different dimensions were measured and discussed. A scanning circuit was also designed and implemented. The measured maximum sensitivity is 1.67%/mN. The minimum resolvable force is 26 mN measured by the scanning circuit. The capacitance distributions induced by normal and shear forces were also successfully captured by the sensing array.

  10. Ductile mode electrochemical oxidation assisted micromachining for glassy carbon

    International Nuclear Information System (INIS)

    Recently, a new mechanical machining process using electrochemical oxidation was reported. Electrochemical oxidation assisted micromachining was applied to the machining of glassy carbon. The material removal process of the electrochemical oxidation assisted micromachining consists of repeated cycles of oxidation followed by removal of the oxide layer. In this paper, we experimentally investigate and compare the critical chip thickness for ductile mode cutting in mechanical machining and electrochemical oxidation assisted micromachining of glassy carbon. The theoretical critical chip thickness is calculated for mechanical machining of glassy carbon and experimentally verified. The effect of electrochemical oxidation on the critical chip thickness for ductile mode micromachining is also studied for glassy carbon. It is found that the critical chip thickness is increased for the electrochemical oxidation assisted micromachining. (paper)

  11. Programmable electronic synthesized capacitance

    Science.gov (United States)

    Kleinberg, Leonard L. (Inventor)

    1987-01-01

    A predetermined and variable synthesized capacitance which may be incorporated into the resonant portion of an electronic oscillator for the purpose of tuning the oscillator comprises a programmable operational amplifier circuit. The operational amplifier circuit has its output connected to its inverting input, in a follower configuration, by a network which is low impedance at the operational frequency of the circuit. The output of the operational amplifier is also connected to the noninverting input by a capacitor. The noninverting input appears as a synthesized capacitance which may be varied with a variation in gain-bandwidth product of the operational amplifier circuit. The gain-bandwidth product may, in turn, be varied with a variation in input set current with a digital to analog converter whose output is varied with a command word. The output impedance of the circuit may also be varied by the output set current. This circuit may provide very small ranges in oscillator frequency with relatively large control voltages unaffected by noise.

  12. A novel capacitive micro-accelerometer with grid strip capacitances and sensing gap alterable capacitances

    Institute of Scientific and Technical Information of China (English)

    Dong Linxi; Chen Jindan; Yan Haixia; Huo Weihong; Li Yongjie; Sun Lingling

    2009-01-01

    The comb capacitances fabricated by deep reactive ion etching (RIE) process have high aspect ratio which is usually smaller than 30 : 1 for the complicated process factors, and the combs are usually not parallel due to the well-known micro-loading effect and other process factors, which restricts the increase of the seismic mass by increasing the thickness of comb to reduce the thermal mechanical noise and the decrease of the gap of the comb capacitances for increasing the sensitive capacitance to reduce the electrical noise. Aiming at the disadvantage of the deep RIE, a novel capacitive micro-accelerometer with grid strip capacitances and sensing gap alterable capacitances is developed. One part of sensing of inertial signal of the micro-accelerometer is by the grid strip capacitances whose overlapping area is variable and which do not have the non-parallel plate's effect caused by the deep RIE process. Another part is by the sensing gap alterable capacitances whose gap between combs can be reduced by the actuators. The designed initial gap of the alterable comb capacitances is relatively large to depress the effect of the maximum aspect ratio (30 : 1) of deep RIE process. The initial gap of the capacitance of the actuator is smaller than the one of the comb capacitances. The difference between the two gaps is the initial gap of the sensitive capacitor. The designed structure depresses greatly the requirement of deep RIE process. The effects of non-parallel combs on the accelerometer are also analyzed. The characteristics of the micro-accelerometer are discussed by field emission microscopy (FEM) tool ANSYS. The tested devices based on slide-film damping effect are fabricated, and the tested quality factor is 514, which shows that grid strip capacitance design can partly improve the resolution and also prove the feasibility of the designed silicon-glass anodically bonding process.

  13. Surface micromachined electrostatically actuated micro peristaltic pump

    OpenAIRE

    Xie, Jun; Shih, Jason; Lin, Qiao; Yang, Bozhi; Tai, Yu-Chong

    2004-01-01

    An electrostatically actuated micro peristaltic pump is reported. The micro pump is entirely surface micromachined using a multilayer parylene technology. Taking advantage of the multilayer technology, the micro pump design enables the pumped fluid to be isolated from the electric field. Electrostatic actuation of the parylene membrane using both DC and AC voltages was demonstrated and applied to fluid pumping based on a 3-phase peristaltic sequence. A maximum flow rate of 1.7 nL min^–1 and a...

  14. Active micromachines: Microfluidics powered by mesoscale turbulence.

    Science.gov (United States)

    Thampi, Sumesh P; Doostmohammadi, Amin; Shendruk, Tyler N; Golestanian, Ramin; Yeomans, Julia M

    2016-07-01

    Dense active matter, from bacterial suspensions and microtubule bundles driven by motor proteins to cellular monolayers and synthetic Janus particles, is characterized by mesoscale turbulence, which is the emergence of chaotic flow structures. By immersing an ordered array of symmetric rotors in an active fluid, we introduce a microfluidic system that exploits spontaneous symmetry breaking in mesoscale turbulence to generate work. The lattice of rotors self-organizes into a spin state where neighboring discs continuously rotate in permanent alternating directions due to combined hydrodynamic and elastic effects. Our virtual prototype demonstrates a new research direction for the design of micromachines powered by the nematohydrodynamic properties of active turbulence. PMID:27419229

  15. Use of chemical mechanical polishing in micromachining

    Science.gov (United States)

    Nasby, R.D.; Hetherington, D.L.; Sniegowski, J.J.; McWhorter, P.J.; Apblett, C.A.

    1998-09-08

    A process for removing topography effects during fabrication of micromachines. A sacrificial oxide layer is deposited over a level containing functional elements with etched valleys between the elements such that the sacrificial layer has sufficient thickness to fill the valleys and extend in thickness upwards to the extent that the lowest point on the upper surface of the oxide layer is at least as high as the top surface of the functional elements in the covered level. The sacrificial oxide layer is then polished down and planarized by chemical-mechanical polishing. Another layer of functional elements is then formed upon this new planarized surface. 4 figs.

  16. Active micromachines: Microfluidics powered by mesoscale turbulence

    CERN Document Server

    Thampi, Sumesh P; Shendruk, Tyler N; Golestanian, Ramin; Yeomans, Julia M

    2016-01-01

    Dense active matter, from bacterial suspensions and microtubule bundles driven by motor proteins to cellular monolayers and synthetic Janus particles, is characterised by mesoscale turbulence, the emergence of chaotic flow structures. By immersing an ordered array of symmetric rotors in an active fluid, we introduce a microfluidic system that exploits spontaneous symmetry breaking in mesoscale turbulence to generate work. The lattice of rotors self-organises into a spin-state where neighbouring discs continuously rotate in permanent alternating directions due to combined hydrodynamic and elastic effects. Our virtual prototype demonstrates a new research direction for the design of micromachines powered by the nematohydrodynamic properties of active turbulence.

  17. Active micromachines: Microfluidics powered by mesoscale turbulence

    Science.gov (United States)

    Thampi, Sumesh P.; Doostmohammadi, Amin; Shendruk, Tyler N.; Golestanian, Ramin; Yeomans, Julia M.

    2016-01-01

    Dense active matter, from bacterial suspensions and microtubule bundles driven by motor proteins to cellular monolayers and synthetic Janus particles, is characterized by mesoscale turbulence, which is the emergence of chaotic flow structures. By immersing an ordered array of symmetric rotors in an active fluid, we introduce a microfluidic system that exploits spontaneous symmetry breaking in mesoscale turbulence to generate work. The lattice of rotors self-organizes into a spin state where neighboring discs continuously rotate in permanent alternating directions due to combined hydrodynamic and elastic effects. Our virtual prototype demonstrates a new research direction for the design of micromachines powered by the nematohydrodynamic properties of active turbulence. PMID:27419229

  18. Optimal pricing of capacitated networks

    NARCIS (Netherlands)

    Grigoriev, Alexander; Loon, van Joyce; Sitters, René; Uetz, Marc

    2009-01-01

    We address the algorithmic complexity of a profit maximization problem in capacitated, undirected networks. We are asked to price a set of $m$ capacitated network links to serve a set of $n$ potential customers. Each customer is interested in purchasing a network connection that is specified by a si

  19. Efficiency of Capacitively Loaded Converters

    DEFF Research Database (Denmark)

    Andersen, Thomas; Huang, Lina; Andersen, Michael A. E.;

    2012-01-01

    introduced as a definition of efficiency. The calculated and measured efficiency curves for charging DEAP actuator, polypropylene film capacitor and X7R MLCC are provided and compared. The attention has to be paid for the voltage dependent capacitive load, like X7R MLCC, when evaluating the charging......This paper explores the characteristic of capacitance versus voltage for dielectric electro active polymer (DEAP) actuator, 2kV polypropylene film capacitor as well as 3kV X7R multi layer ceramic capacitor (MLCC) at the beginning. An energy efficiency for capacitively loaded converters is...... polypropylene film capacitor can be the equivalent capacitive load. Because of the voltage dependent characteristic, X7R MLCC cannot be used to replace the DEAP actuator. However, this type of capacitor can be used to substitute the capacitive actuator with voltage dependent property at the development phase....

  20. Robust micromachining of compliant mechanisms using silicides

    International Nuclear Information System (INIS)

    We introduce an innovative sacrificial surface micromachining process that enhances the mechanical robustness of freestanding microstructures and compliant mechanisms. This process facilitates the fabrication, and improves the assembly yield of the out-of-plane micro sensors and actuators. Fabrication of a compliant mechanism using conventional sacrificial surface micromachining results in a non-planar structure with a step between the structure and its anchor. During mechanism actuation or assembly, stress accumulation at the structure step can easily exceed the yield strength of the material and lead to the structure failure. Our process overcomes this topographic issue by virtually eliminating the step between the structure and its anchor, and achieves planarization without using chemical mechanical polishing. The process is based on low temperature and post-CMOS compatible nickel silicide technology. We use a layer of amorphous silicon (a-Si) as a sacrificial layer, which is locally converted to nickel silicide to form the anchors. High etch selectivity between silicon and nickel silicide in the xenon difluoride gas (sacrificial layer etchant) enables us to use the silicide to anchor the structures to the substrate. The formed silicide has the same thickness as the sacrificial layer; therefore, the structure is virtually flat. The maximum measured step between the anchor and the sacrificial layer is about 10 nm on a 300 nm thick sacrificial layer. (paper)

  1. Micromachining using a focused ion beam miller

    International Nuclear Information System (INIS)

    Full text: The focused ion beam (FIB) miller is becoming well established as a machine for the structural analysis of materials and for the rapid preparation of transmission electron microscope specimens. It has also been used for some time in the semiconducting materials industry for the analysis, repair and redesign of device materials. However, one emerging technique is the use of the FIB for micromachining. The FIB software can also be used to manufacture and machine components. This process can occur through converting software, typically in the form of bitmaps or TIF files, to proprietary 'stream' files. These files allow, often complex, patterns to be generated and milled into the specimen and thus the generation of micro-electromechanical systems. Frequently, this involves largely two-dimensional patterns and structures, however, more complex patterns and file types can be generated which allow, for example, device prototyping or the preparation of three-dimensional structures such as atom probe field ion microscope (APFIM) specimens. In this presentation the protocols for creating and using these files will be described together with examples of the patterns and its application to micromachining, device prototyping and APFIM specimens. Copyright (2002) Australian Society for Electron Microscopy Inc

  2. A Micromachined Pressure Sensor with Integrated Resonator Operating at Atmospheric Pressure

    Directory of Open Access Journals (Sweden)

    Sen Ren

    2013-12-01

    Full Text Available A novel resonant pressure sensor with an improved micromechanical double-ended tuning fork resonator packaged in dry air at atmospheric pressure is presented. The resonator is electrostatically driven and capacitively detected, and the sensor is designed to realize a low cost resonant pressure sensor with medium accuracy. Various damping mechanisms in a resonator that is vibrating at atmospheric pressure are analyzed in detail, and a formula is developed to predict the overall quality factor. A trade-off has been reached between the quality factor, stress sensitivity and drive capability of the resonator. Furthermore, differential sense elements and the method of electromechanical amplitude modulation are used for capacitive detection to obtain a large signal-to-noise ratio. The prototype sensor chip is successfully fabricated using a micromachining process based on a commercially available silicon-on-insulator wafer and is hermetically encapsulated in a custom 16-pin Kovar package. Preliminary measurements show that the fundamental frequency of the resonant pressure sensor is approximately 34.55 kHz with a pressure sensitivity of 20.77 Hz/kPa. Over the full scale pressure range of 100–400 kPa and the whole temperature range of −20–60 °C, high quality factors from 1,146 to 1,772 are obtained. The characterization of the prototype sensor reveals the feasibility of a resonant pressure sensor packaged at atmospheric pressure.

  3. The Cooling and Lubrication Performance of Graphene Platelets in Micro-Machining Environments

    Science.gov (United States)

    Chu, Bryan

    The research presented in this thesis is aimed at investigating the use of graphene platelets (GPL) to address the challenges of excessive tool wear, reduced part quality, and high specific power consumption encountered in micro-machining processes. There are two viable methods of introducing GPL into micro-machining environments, viz., the embedded delivery method, where the platelets are embedded into the part being machined, and the external delivery method, where graphene is carried into the cutting zone by jetting or atomizing a carrier fluid. The study involving the embedded delivery method is focused on the micro-machining performance of hierarchical graphene composites. The results of this study show that the presence of graphene in the epoxy matrix improves the machinability of the composite. In general, the tool wear, cutting forces, surface roughness, and extent of delamination are all seen to be lower for the hierarchical composite when compared to the conventional two-phase glass fiber composite. These improvements are attributed to the fact that graphene platelets improve the thermal conductivity of the matrix, provide lubrication at the tool-chip interface and also improve the interface strength between the glass fibers and the matrix. The benefits of graphene are seen to also carry over to the external delivery method. The platelets provide improved cooling and lubrication performance to both environmentally-benign cutting fluids as well as to semi-synthetic cutting fluids used in micro-machining. The cutting performance is seen to be a function of the geometry (i.e., lateral size and thickness) and extent of oxygen-functionalization of the platelet. Ultrasonically exfoliated platelets (with 2--3 graphene layers and lowest in-solution characteristic lateral length of 120 nm) appear to be the most favorable for micro-machining applications. Even at the lowest concentration of 0.1 wt%, they are capable of providing a 51% reduction in the cutting

  4. X-ray microcalorimeter arrays fabricated by surface micromachining

    Energy Technology Data Exchange (ETDEWEB)

    Hilton, G.C. E-mail: hilton@boulder.nist.gov; Beall, J.A.; Deiker, S.; Vale, L.R.; Doriese, W.B.; Beyer, Joern; Ullom, J.N.; Reintsema, C.D.; Xu, Y.; Irwin, K.D

    2004-03-11

    We are developing arrays of Mo/Cu transition edge sensor-based detectors for use as X-ray microcalorimeters and sub-millimeter bolometers. We have fabricated 8x8 pixel X-ray microcalorimeter arrays using surface micromachining. Surface-micromachining techniques hold the promise of scalability to much larger arrays and may allow for the integration of in-plane multiplexer elements. In this paper we describe the surface micromachining process and recent improvements in the device geometry that provide for increased mechanical strength. We also present X-ray and heat pulse spectra collected using these detectors.

  5. X-ray microcalorimeter arrays fabricated by surface micromachining

    International Nuclear Information System (INIS)

    We are developing arrays of Mo/Cu transition edge sensor-based detectors for use as X-ray microcalorimeters and sub-millimeter bolometers. We have fabricated 8x8 pixel X-ray microcalorimeter arrays using surface micromachining. Surface-micromachining techniques hold the promise of scalability to much larger arrays and may allow for the integration of in-plane multiplexer elements. In this paper we describe the surface micromachining process and recent improvements in the device geometry that provide for increased mechanical strength. We also present X-ray and heat pulse spectra collected using these detectors

  6. A micromachined pressure/flow sensor

    NARCIS (Netherlands)

    Oosterbroek, R.E.; Lammerink, T.S.J.; Berenschot, J.W.; Krijnen, G.J.M.; Elwenspoek, M.C.; Berg, van den A.

    1999-01-01

    The micromechanical equivalent of a differential pressure flow-sensor, well known in macro mechanics, is discussed. Two separate pressure sensors are used for the device, enabling to measure both, pressure as well as volume flow-rate. An integrated sensor with capacitive read-out as well as a hybrid

  7. Integrated control and health monitoring capacitive displacement sensor development task. Orbit transfer rocket engine technology program

    Science.gov (United States)

    Collamore, Frank N.

    1989-01-01

    The development of a miniature multifunction turbomachinery shaft displacement sensor using state-of-the-art non-contract capacitive sensing technology is described. Axial displacement, radial displacement, and speed are sensed using a single probe within the envelope normally required for a single function. A survey of displacement sensing technology is summarized including inductive, capacitive, optical and ultrasonic techniques. The design and operation of an experimental triple function sensor is described. Test results are included showing calibration tests and simultaneous dynamic testing of multiple functions. Recommendations for design changes are made to improve low temperature performance, reliability, and for design of a flight type signal conditioning unit.

  8. Structure optimization and simulation analysis of the quartz micromachined gyroscope

    Directory of Open Access Journals (Sweden)

    Xuezhong Wu

    2014-02-01

    Full Text Available Structure optimization and simulation analysis of the quartz micromachined gyroscope are reported in this paper. The relationships between the structure parameters and the frequencies of work mode were analysed by finite element analysis. The structure parameters of the quartz micromachined gyroscope were optimized to reduce the difference between the frequencies of the drive mode and the sense mode. The simulation results were proved by testing the prototype gyroscope, which was fabricated by micro-electromechanical systems (MEMS technology. Therefore, the frequencies of the drive mode and the sense mode can match each other by the structure optimization and simulation analysis of the quartz micromachined gyroscope, which is helpful in the design of the high sensitivity quartz micromachined gyroscope.

  9. Fabrication of silicon bolometers with bulk micromachining technology

    International Nuclear Information System (INIS)

    Monolithic silicon bolometers with implanted thermistors, micromachined thermal masses and suspension beams have been developed. These devices are intended for accurate β-decay spectrum measurements in the Milano neutrino mass experiment. By means of a dedicated micromachining fabrication process very small thermal masses (700x430x15 μm3) and links (2150x22x15 μm3) have been directly integrated in the device, thus obtaining reproducible bolometers which are suitable for use in detector arrays. The fabrication process involves a combination of standard IC technologies and bulk micromachining techniques, based on wet etching steps in tetramethylammonium hydroxide (TMAH) water solutions. Protection of aluminum metal lines and surface roughness control are two important features of the developed technique. The proposed micromachining approach eventually aims at fabricating hundreds of highly reproducible bolometers, to be used simultaneously in order to improve the sensitivity of the neutrino mass experiment

  10. Surface Micromachined Arrays of Transition-Edge Detectors Project

    Data.gov (United States)

    National Aeronautics and Space Administration — An innovative surface micromachining technique is described for the fabrication of closely-packed arrays of transition edge sensor (TES) x-ray microcalorimeters....

  11. Fabrication of silicon bolometers with bulk micromachining technology

    Energy Technology Data Exchange (ETDEWEB)

    Faes, A. E-mail: alesfaes@itc.it; Giacomozzi, F.; Margesin, B.; Nucciotti, A

    2004-03-11

    Monolithic silicon bolometers with implanted thermistors, micromachined thermal masses and suspension beams have been developed. These devices are intended for accurate {beta}-decay spectrum measurements in the Milano neutrino mass experiment. By means of a dedicated micromachining fabrication process very small thermal masses (700x430x15 {mu}m{sup 3}) and links (2150x22x15 {mu}m{sup 3}) have been directly integrated in the device, thus obtaining reproducible bolometers which are suitable for use in detector arrays. The fabrication process involves a combination of standard IC technologies and bulk micromachining techniques, based on wet etching steps in tetramethylammonium hydroxide (TMAH) water solutions. Protection of aluminum metal lines and surface roughness control are two important features of the developed technique. The proposed micromachining approach eventually aims at fabricating hundreds of highly reproducible bolometers, to be used simultaneously in order to improve the sensitivity of the neutrino mass experiment.

  12. Capacitive Position Sensor For Accelerometer

    Science.gov (United States)

    Vanzandt, Thomas R.; Kaiser, William J.; Kenny, Thomas W.

    1995-01-01

    Capacitive position sensor measures displacement of proof mass in prototype accelerometer described in "Single-Crystal Springs for Accelerometers" (NPO-18795). Sensor is ultrasensitive, miniature device operating at ultra-high frequency and described in more detail in "Ultra-High-Frequency Capacitive Displacement Sensor," (NPO-18675). Advances in design and fabrication of prototype accelerometer also applicable to magnetometers and other sensors in which sensed quantities measured in terms of deflections of small springs.

  13. Micromachined Tunneling Displacement Transducers for Physical Sensors

    Science.gov (United States)

    Kenny, T. W.; Kaiser, W. J.; Podosek, J. A.; Rockstad, H. K.; Reynolds, J. K.; Vote, E. C.

    1993-01-01

    We have designed and constructed a series of tunneling sensors which take advantage of the extreme position sensitivity of electron tunneling. In these sensors, a tunneling displacement transducer, based on scanning tunneling microscopy principles, is used to detect the signal-induced motion of a sensor element. Through the use of high-resonant frequency mechanical elements for the transducer, sensors may be constructed which offer wide bandwidth, and are robust and easily operated. Silicon micromachining may be used to fabricate the transducer elements, allowing integration of sensor and control electronics. Examples of tunneling accelerometers and infrared detectors will be discussed. In each case, the use of the tunneling transducer allows miniaturization of the sensor as well as enhancement of the sensor performance.

  14. Laser micromachining of sputtered DLC films

    Energy Technology Data Exchange (ETDEWEB)

    Fu, Y.Q. [Department of Engineering, University of Cambridge, Trumpington Street, Cambridge CB2, 1PZ (United Kingdom)]. E-mail: yf229@cam.ac.uk; Luo, J.K. [Department of Engineering, University of Cambridge, Trumpington Street, Cambridge CB2, 1PZ (United Kingdom); Flewitt, A.J. [Department of Engineering, University of Cambridge, Trumpington Street, Cambridge CB2, 1PZ (United Kingdom); Ong, S.E. [School of Mechanical and Aerospace Engineering, Nanyang Technological University, Nanyang Avenue, Singapore 639798 (Singapore); Zhang, S. [School of Mechanical and Aerospace Engineering, Nanyang Technological University, Nanyang Avenue, Singapore 639798 (Singapore); Milne, W.I. [Department of Engineering, University of Cambridge, Trumpington Street, Cambridge CB2, 1PZ (United Kingdom)

    2006-04-30

    DLC films with different thicknesses (from 100 nm to 1.9 {mu}m) were deposited using sputtering of graphite target in pure argon atmosphere without substrate heating. Film microstructures (sp{sup 2}/sp{sup 3} ratio) and mechanical properties (modulus, hardness, stress) were characterized as a function of film thickness. A thin layer of aluminum about 60 nm was deposited on the DLC film surface. Laser micromachining of Al/DLC layer was performed to form microcantilever structures, which were released using a reactive ion etching system with SF{sub 6} plasma. Due to the intrinsic stress in DLC films and bimorph Al/DLC structure, the microcantilevers bent up with different curvatures. For DLC film of 100 nm thick, the cantilever even formed microtubes. The relationship between the bimorph beam bending and DLC film properties (such as stress, modulus, etc.) were discussed in details.

  15. Surface micromachining of UV transparent materials

    Energy Technology Data Exchange (ETDEWEB)

    Kopitkovas, G.; Lippert, T.; David, C.; Wokaun, A.; Gobrecht, J

    2004-04-01

    A method which utilizes XeCl excimer laser and an absorbing liquid in contact with the material for precise structuring of UV transparent materials is presented. This one step micromachining process enables the fabrication of micro-optical elements with continuous profiles such as Fresnel micro-lenses in CaF{sub 2} and quartz with fluences well below the damage threshold of these materials. The roughness of the etched features varies from 10 nm to 3 {mu}m depending on the laser fluence and material. The etch rates of different UV transparent materials (such as CaF{sub 2}, BaF{sub 2}, sapphire and quartz) at various laser fluences suggest that several different parameters influence the etching process.

  16. Laser micromachining of sputtered DLC films

    International Nuclear Information System (INIS)

    DLC films with different thicknesses (from 100 nm to 1.9 μm) were deposited using sputtering of graphite target in pure argon atmosphere without substrate heating. Film microstructures (sp2/sp3 ratio) and mechanical properties (modulus, hardness, stress) were characterized as a function of film thickness. A thin layer of aluminum about 60 nm was deposited on the DLC film surface. Laser micromachining of Al/DLC layer was performed to form microcantilever structures, which were released using a reactive ion etching system with SF6 plasma. Due to the intrinsic stress in DLC films and bimorph Al/DLC structure, the microcantilevers bent up with different curvatures. For DLC film of 100 nm thick, the cantilever even formed microtubes. The relationship between the bimorph beam bending and DLC film properties (such as stress, modulus, etc.) were discussed in details

  17. Performance Evaluation of Laser Micro-Machining Installations

    OpenAIRE

    Daemi, Bita; Mattsson, Lars

    2013-01-01

    Laser micro-machining is a growing field for micro manufacturing in many different materials. To obtain a better understanding of the accuracy of laser micro-machining equipment, moreover machine’s specification, a precise verification test is needed to measure the absolute performance of the machine. Available capability information is usually based on specifications given for the machine installations by machine deliverers. But in practice the absolute performances of some of the micro lase...

  18. The concept of chemical capacitance, A critique.

    OpenAIRE

    Trissl, H. W.

    1981-01-01

    The concept of chemical capacitance as introduced by Hong and Mauzerall (Proc. Natl. Acad. Sci. U.S.A. 1974. 71:1564) is critically reexamined. This novel capacitance was introduced to explain the time-course of flash-induced photocurrents observed in lipid bilayer membranes containing porphyrins. According to Hong and Mauzerall, the chemical capacitance results from a combination of three fundamental capacitances: the geometric membrane capacitance and the two interfacial double layer capaci...

  19. Electrostatic and Small-Signal Analysis of CMUTs With Circular and Square Anisotropic Plates

    DEFF Research Database (Denmark)

    la Cour, Mette Funding; Christiansen, Thomas Lehrmann; Jensen, Jørgen Arendt;

    2015-01-01

    Traditionally, Capacitive Micromachined Ultrasonic Transducers (CMUTs) are modeled using the isotropic plate equation and this leads to deviations between analytical calcu- lations and Finite Element Modeling (FEM). In this paper, the deflection is calculated for both circular and square plates...

  20. Characterization of the tuning performance of a micro-machined Fabry–Pérot interferometer for thermal infrared

    International Nuclear Information System (INIS)

    We developed a tunable surface-micromachined Fabry–Pérot interferometer for the thermal infrared spectral region of wavelengths 7–11 µm. The device is controlled through capacitive actuation with the maximum applied voltage near 30 V. The transmission characteristics, as a function of the tuning actuation, were recorded for several samples with a Fourier-transform infrared spectrometer. Two different device designs are compared in terms of the transmission peak width and height evolution along the actuation. Numerical simulations and the established analytical Airy expression are exploited in order to bridge the gap between an ideal-model performance and the measurement results. Emphasis in the analysis is on the movable mirror unidealities and their implications in the performance. Finally, we present example data recorded with a laboratory setup of a gas spectrometer, based on the device under study. (paper)

  1. Ultrasonic wave inspection device

    International Nuclear Information System (INIS)

    The device of the present invention inspects incore structural components by visualizing them by scanning an ultrasonic transducer in an opaque liquid metal sodium in a pressure vessel of an FBR type reactor. Namely, a piezoelectric vibrator for transmitting/receiving ultrasonic waves is formed into a protruded shape. A portion at the center of the protruded piezoelectric vibrator is coaxially separated. Upon transmitting ultrasonic waves, a large opening of the entire piezoelectric vibrator is used. A small opening at the center of the piezoelectric vibrator is used upon receiving ultrasonic waves. With such a constitution, an object to be inspected is visualized based on the waveform of the received ultrasonic wave signals defining the center of a curvature of the protruded piezoelectric vibrator as a position of transmitting ultrasonic waves and defining the center of the opening at the center of the piezoelectric vibrator as a position of receiving ultrasonic waves. As a result, the energy of the ultrasonic waves can be enhanced to improve sensitivity upon transmitting ultrasonic waves. Since the distance between an optional position of the receiving surface and the reflecting surface of the object is minimized upon receiving ultrasonic waves, there is no distortion in the waveforms of the received signals thereby enabling to obtain images at high accuracy. (I.S.)

  2. Improving capacitance/damping ratio in a capacitive MEMS transducer

    International Nuclear Information System (INIS)

    Damping forces play an important role in capacitive MEMS (microelectromechanical systems) behavior, and typical damper design (parallel-plates) cannot address the design conflict between increase in electrical capacitance and damping reduction. Squeeze-film damping in in-plane parallel-plate MEMS is discussed here and a novel damper geometry for gap-varying parallel-plates is introduced and used to increase the capacitance/damping ratio. The new geometry is compared with a typical parallel-plate design for an silicon-on-insulator process (25 µm thick) and experimental data shows an approximate 25% to 50% reduction for the damping coefficient in structures with 500 µm long dampers (for a gap variation between 0.75 and 3.75 µm), in agreement with computational fluid dynamics simulations, without significantly affecting the capacitance value (∼4% reduction). Preliminary simulations to study the role of the different geometric parameters involved in the improved geometry are also performed and reveal that the channel width is the most critical value for effective damping reduction. (paper)

  3. Silicon micromachined sensor for gas detection

    Energy Technology Data Exchange (ETDEWEB)

    Moldovan, Carmen; Hinescu, Lavinia; Hinescu, Mihail; Iosub, Rodica; Nisulescu, Mihai; Firtat, Bogdan; Modreanu, Mircea; Dascalu, Dan; Voicu, Victor; Tarabasanu, Cornel

    2003-08-15

    The paper presents the layout and the technological steps for an interdigitated integrated capacitor used for gases detection. Silicon micromachining technology is applied for manufacturing the sensor substrate. The sensitive layer used is phthalocyanine (Pc) deposed by evaporation technique under high vacuum. The phthalocyanine derivatives are obtained by the same deposition technique. Considering the different sensitivities of phthalocyanines derivatives, we obtained different gas sensors. The copper phthalocyanine (CuPc), nickel phthalocyanine (NiPc) and iron phthalocyanine (FePc) have been investigated for NO{sub x} detection. The measurement of sensors for NO{sub x} and NO{sub 2} detection will be presented as gas concentration versus impedance. The microsensors testing structures deposited with phthalocyanines were investigated by impedance measurements in a vacuum chamber controlled by a gas analyser. The measurements were made at room temperature but a medium temperature is applied (<200 deg. C) after measurement, for cleaning the material in order to reuse the sensor. The sensor is integrated, MOS compatible, cheap, easy to be used and has a low power consumption.

  4. Silicon Micromachining in RF and Photonic Applications

    Science.gov (United States)

    Lin, Tsen-Hwang; Congdon, Phil; Magel, Gregory; Pang, Lily; Goldsmith, Chuck; Randall, John; Ho, Nguyen

    1995-01-01

    Texas Instruments (TI) has developed membrane and micromirror devices since the late 1970s. An eggcrate space membrane was used as the spatial light modulator in the early years. Discrete micromirrors supported by cantilever beams created a new era for micromirror devices. Torsional micromirror and flexure-beam micromirror devices were promising for mass production because of their stable supports. TI's digital torsional micromirror device is an amplitude modulator (known as the digital micromirror device (DMD) and is in production development, discussed elsewhere. We also use a torsional device for a 4 x 4 fiber-optic crossbar switch in a 2 cm x 2 cm package. The flexure-beam micromirror device is an analog phase modulator and is considered more efficient than amplitude modulators for use in optical processing systems. TI also developed millimeter-sized membranes for integrated optical switches for telecommunication and network applications. Using a member in radio frequency (RF) switch applications is a rapidly growing area because of the micromechanical device performance in microsecond-switching characteristics. Our preliminary membrane RF switch test structure results indicate promising speed and RF switching performance. TI collaborated with MIT for modeling of metal-based micromachining.

  5. An Investigation of Processes for Glass Micromachining

    Directory of Open Access Journals (Sweden)

    Nguyen Van Toan

    2016-03-01

    Full Text Available This paper presents processes for glass micromachining, including sandblast, wet etching, reactive ion etching (RIE, and glass reflow techniques. The advantages as well as disadvantages of each method are presented and discussed in light of the experiments. Sandblast and wet etching techniques are simple processes but face difficulties in small and high-aspect-ratio structures. A sandblasted 2 cm × 2 cm Tempax glass wafer with an etching depth of approximately 150 µm is demonstrated. The Tempax glass structure with an etching depth and sides of approximately 20 μm was observed via the wet etching process. The most important aspect of this work was to develop RIE and glass reflow techniques. The current challenges of these methods are addressed here. Deep Tempax glass pillars having a smooth surface, vertical shapes, and a high aspect ratio of 10 with 1-μm-diameter glass pillars, a 2-μm pitch, and a 10-μm etched depth were achieved via the RIE technique. Through-silicon wafer interconnects, embedded inside the Tempax glass, are successfully demonstrated via the glass reflow technique. Glass reflow into large cavities (larger than 100 μm, a micro-trench (0.8-μm wide trench, and a micro-capillary (1-μm diameter are investigated. An additional optimization of process flow was performed for glass penetration into micro-scale patterns.

  6. Apparatus for precision micromachining with lasers

    Science.gov (United States)

    Chang, J.J.; Dragon, E.P.; Warner, B.E.

    1998-04-28

    A new material processing apparatus using a short-pulsed, high-repetition-rate visible laser for precision micromachining utilizes a near diffraction limited laser, a high-speed precision two-axis tilt-mirror for steering the laser beam, an optical system for either focusing or imaging the laser beam on the part, and a part holder that may consist of a cover plate and a back plate. The system is generally useful for precision drilling, cutting, milling and polishing of metals and ceramics, and has broad application in manufacturing precision components. Precision machining has been demonstrated through percussion drilling and trepanning using this system. With a 30 W copper vapor laser running at multi-kHz pulse repetition frequency, straight parallel holes with size varying from 500 microns to less than 25 microns and with aspect ratios up to 1:40 have been consistently drilled with good surface finish on a variety of metals. Micromilling and microdrilling on ceramics using a 250 W copper vapor laser have also been demonstrated with good results. Materialographic sections of machined parts show little (submicron scale) recast layer and heat affected zone. 1 fig.

  7. Method and apparatus for precision laser micromachining

    Science.gov (United States)

    Chang, Jim; Warner, Bruce E.; Dragon, Ernest P.

    2000-05-02

    A method and apparatus for micromachining and microdrilling which results in a machined part of superior surface quality is provided. The system uses a near diffraction limited, high repetition rate, short pulse length, visible wavelength laser. The laser is combined with a high speed precision tilting mirror and suitable beam shaping optics, thus allowing a large amount of energy to be accurately positioned and scanned on the workpiece. As a result of this system, complicated, high resolution machining patterns can be achieved. A cover plate may be temporarily attached to the workpiece. Then as the workpiece material is vaporized during the machining process, the vapors condense on the cover plate rather than the surface of the workpiece. In order to eliminate cutting rate variations as the cutting direction is varied, a randomly polarized laser beam is utilized. A rotating half-wave plate is used to achieve the random polarization. In order to correctly locate the focus at the desired location within the workpiece, the position of the focus is first determined by monitoring the speckle size while varying the distance between the workpiece and the focussing optics. When the speckle size reaches a maximum, the focus is located at the first surface of the workpiece. After the location of the focus has been determined, it is repositioned to the desired location within the workpiece, thus optimizing the quality of the machined area.

  8. Electromagnetic ultrasonic guided waves

    CERN Document Server

    Huang, Songling; Li, Weibin; Wang, Qing

    2016-01-01

    This book introduces the fundamental theory of electromagnetic ultrasonic guided waves, together with its applications. It includes the dispersion characteristics and matching theory of guided waves; the mechanism of production and theoretical model of electromagnetic ultrasonic guided waves; the effect mechanism between guided waves and defects; the simulation method for the entire process of electromagnetic ultrasonic guided wave propagation; electromagnetic ultrasonic thickness measurement; pipeline axial guided wave defect detection; and electromagnetic ultrasonic guided wave detection of gas pipeline cracks. This theory and findings on applications draw on the author’s intensive research over the past eight years. The book can be used for nondestructive testing technology and as an engineering reference work. The specific implementation of the electromagnetic ultrasonic guided wave system presented here will also be of value for other nondestructive test developers.

  9. Ultrasonic testing device

    International Nuclear Information System (INIS)

    The ultrasonic transmitter made of polarized ferroelectric ceramic material (lead zirconate titanate) is arranged in a strip carrier which allows it to be introduced between the fuel elements of a fuel subassembly in a water cooled nuclear reactor. The ultrasonic transmitter is insulated relative to the carrier. The echo of the ra dal ultrasonic pulse is recorded which changes as faulty water filled fuel elements are detected. (RW)

  10. Wedges for ultrasonic inspection

    Energy Technology Data Exchange (ETDEWEB)

    Gavin, Donald A. (Rexford, NY)

    1982-01-01

    An ultrasonic transducer device is provided which is used in ultrasonic inspection of the material surrounding a threaded hole and which comprises a wedge of plastic or the like including a curved threaded surface adapted to be screwed into the threaded hole and a generally planar surface on which a conventional ultrasonic transducer is mounted. The plastic wedge can be rotated within the threaded hole to inspect for flaws in the material surrounding the threaded hole.

  11. Driven shielding capacitive proximity sensor

    Science.gov (United States)

    Vranish, John M. (Inventor); McConnell, Robert L. (Inventor)

    2000-01-01

    A capacitive proximity sensing element, backed by a reflector driven at the same voltage as and in phase with the sensor, is used to reflect the field lines away from a grounded robot arm towards an intruding object, thus dramatically increasing the sensor's range and sensitivity.

  12. Water desalination via capacitive deionization

    NARCIS (Netherlands)

    Suss, M.E.; Porada, S.; Sun, X.; Biesheuvel, P.M.; Yoon, J.; Presser, V.

    2015-01-01

    Capacitive deionization (CDI) is an emerging technology for the facile removal of charged ionic species from aqueous solutions, and is currently being widely explored for water desalination applications. The technology is based on ion electrosorption at the surface of a pair of electrically charg

  13. Voltage Dependence of Supercapacitor Capacitance

    Directory of Open Access Journals (Sweden)

    Szewczyk Arkadiusz

    2016-09-01

    Full Text Available Electronic Double-Layer Capacitors (EDLC, called Supercapacitors (SC, are electronic devices that are capable to store a relatively high amount of energy in a small volume comparing to other types of capacitors. They are composed of an activated carbon layer and electrolyte solution. The charge is stored on electrodes, forming the Helmholtz layer, and in electrolyte. The capacitance of supercapacitor is voltage- dependent. We propose an experimental method, based on monitoring of charging and discharging a supercapacitor, which enables to evaluate the charge in an SC structure as well as the Capacitance-Voltage (C-V dependence. The measurement setup, method and experimental results of charging/discharging commercially available supercapacitors in various voltage and current conditions are presented. The total charge stored in an SC structure is proportional to the square of voltage at SC electrodes while the charge on electrodes increases linearly with the voltage on SC electrodes. The Helmholtz capacitance increases linearly with the voltage bias while a sublinear increase of total capacitance was found. The voltage on SC increases after the discharge of electrodes due to diffusion of charges from the electrolyte to the electrodes. We have found that the recovery voltage value is linearly proportional to the initial bias voltage value.

  14. Micromachined cutting blade formed from {211}-oriented silicon

    Energy Technology Data Exchange (ETDEWEB)

    Fleming, James G.; Sniegowski, Jeffry J.; Montague, Stephen

    2003-09-09

    A cutting blade is disclosed fabricated of micromachined silicon. The cutting blade utilizes a monocrystalline silicon substrate having a {211} crystalline orientation to form one or more cutting edges that are defined by the intersection of {211} crystalline planes of silicon with {111} crystalline planes of silicon. This results in a cutting blade which has a shallow cutting-edge angle .theta. of 19.5.degree.. The micromachined cutting blade can be formed using an anisotropic wet etching process which substantially terminates etching upon reaching the {111} crystalline planes of silicon. This allows multiple blades to be batch fabricated on a common substrate and separated for packaging and use. The micromachined cutting blade, which can be mounted to a handle in tension and optionally coated for increased wear resistance and biocompatibility, has multiple applications including eye surgery (LASIK procedure).

  15. Micromachined cutting blade formed from {211}-oriented silicon

    Energy Technology Data Exchange (ETDEWEB)

    Fleming, James G. (Albuquerque, NM); Fleming, legal representative, Carol (Burbank, CA); Sniegowski, Jeffry J. (Tijeras, NM); Montague, Stephen (Albuquerque, NM)

    2011-08-09

    A cutting blade is disclosed fabricated of micromachined silicon. The cutting blade utilizes a monocrystalline silicon substrate having a {211} crystalline orientation to form one or more cutting edges that are defined by the intersection of {211} crystalline planes of silicon with {111} crystalline planes of silicon. This results in a cutting blade which has a shallow cutting-edge angle .theta. of 19.5.degree.. The micromachined cutting blade can be formed using an anisotropic wet etching process which substantially terminates etching upon reaching the {111} crystalline planes of silicon. This allows multiple blades to be batch fabricated on a common substrate and separated for packaging and use. The micromachined cutting blade, which can be mounted to a handle in tension and optionally coated for increased wear resistance and biocompatibility, has multiple applications including eye surgery (LASIK procedure).

  16. Development of Micromachine Gas Turbine for Portable Power Generation

    Science.gov (United States)

    Isomura, Kousuke; Tanaka, Shuji; Togo, Shinichi; Kanebako, Hideki; Murayama, Motohide; Saji, Nobuyoshi; Sato, Fumihiro; Esashi, Masayoshi

    Micromachine gas turbine with centrifugal impellers of 10mm diameter fabricated by 5-axis micro-milling is under development at Tohoku University, in conjunction with Ishikawajima-Harima Heavy Industries Co., Ltd. (IHI), Tohoku-Gakuin University, and Sankyo Seiki Mfg. Co., Ltd. The development is currently at the stage of proving the feasibility of the gas turbine cycle by component tests. Micro-combustors have been developed for both hydrogen and methane fuel. Over 99.9% of the combustion efficiency has been realized in both combustors and the baseline configuration of the combustor for the gas turbine is set. A compressor of 10mm diameter has been developed as a micromachined turbocharger. The performance test of the micromachined turbocharger has been started, and ran up to 566000rpm, which is approximately 65% of the design speed. Compressor performance has been successfully measured along a constant speed line at 55% of the design speed.

  17. A batch process micromachined thermoelectric energy harvester: fabrication and characterization

    International Nuclear Information System (INIS)

    Micromachined thermopiles are considered as a cost-effective solution for energy harvesters working at a small temperature difference and weak heat flows typical for, e.g., the human body. They can be used for powering autonomous wireless sensor nodes in a body area network. In this paper, a micromachined thermoelectric energy harvester with 6 µm high polycrystalline silicon germanium (poly-SiGe) thermocouples fabricated on a 6 inch wafer is presented. An open circuit voltage of 1.49 V and an output power of 0.4 µW can be generated with 3.5 K temperature difference in a model of a wearable micromachined energy harvester of the discussed design, which has a die size of 1.0 mm × 2.5 mm inside a watch-size generator

  18. Acoustic micromachining of three-dimensional surfaces for biological applications.

    Science.gov (United States)

    Entcheva, Emilia; Bien, Harold

    2005-02-01

    We present the use of an accessible micromachining technique (acoustic micromachining) for manufacturing micron-feature surfaces with non-discretely varying depth. Acoustic micromachining allows for non-photolithographic production of metal templates with programmable spatial patterns and involves the use of standard acoustic, cutting and electroplating equipment for mass production of vinyl records. Simple 3D patterns were transferred from an acoustic signal into working nickel templates, from which elastic polymer molds were obtained, featuring deep surface grooves and non-discrete (smooth) variations in the z-dimension. Versatility and applicability of the method is demonstrated in obtaining microfluidics structures, manufacturing high-surface area wavy polymer fibers, assembly of cell networks on scaffolds with 3D topography, and microcontact printing of proteins and cells. PMID:15672132

  19. Capacitive Proximity Sensor Has Longer Range

    Science.gov (United States)

    Vranish, John M.

    1992-01-01

    Capacitive proximity sensor on robot arm detects nearby object via capacitive effect of object on frequency of oscillator. Sensing element part of oscillator circuit operating at about 20 kHz. Total capacitance between sensing element and ground constitutes tuning capacitance of oscillator. Sensor circuit includes shield driven by replica of alternating voltage applied to sensing element. Driven shield concentrates sensing electrostatic field in exterior region to enhance sensitivity to object. Sensitivity and dynamic range has corresponding 12-to-1 improvement.

  20. Active Targets For Capacitive Proximity Sensors

    Science.gov (United States)

    Jenstrom, Del T.; Mcconnell, Robert L.

    1994-01-01

    Lightweight, low-power active targets devised for use with improved capacitive proximity sensors described in "Capacitive Proximity Sensor Has Longer Range" (GSC-13377), and "Capacitive Proximity Sensors With Additional Driven Shields" (GSC-13475). Active targets are short-distance electrostatic beacons; they generate known alternating electro-static fields used for alignment and/or to measure distances.

  1. Deep ultraviolet laser micromachining of novel fibre optic devices

    International Nuclear Information System (INIS)

    A deep ultraviolet F2 laser, with output at 157-nm wavelength, has been adopted for micro-shaping the end facets of single and multi-mode silica optical fibres. The high energy 7.9-eV photons drive strong interactions in the wide-bandgap silica fibres to enable the fabrication of surface-relief microstructures with high spatial resolution and smooth surface morphology. Diffraction gratings, focusing lenses, and Mach-Zehnder interferometric structures have been micromachined onto the cleaved-fibre facets and optically characterized. F2-laser micromachining is shown to be a rapid and facile means for direct-writing of novel infibre photonic components

  2. UV laser micromachining of ceramic materials: formation of columnar topographies

    International Nuclear Information System (INIS)

    Laser machining is increasingly appearing as an alternative for micromachining of ceramics. Using ceramic materials using excimer lasers can result in smooth surfaces or in the formation of cone-like or columnar topography. Potential applications of cone-shaped or columnar surface topography include, for example, light trapping in anti-reflection coatings and improvement of adhesion bonding between ceramic materials. In this communication results of a comparative study of surface topography change during micromachining of several ceramic materials with different ablation behaviors are reported. (orig.)

  3. System for programmable micromachining by means of submicron ion beam

    International Nuclear Information System (INIS)

    A system with submicron ion beam is described. Very bright ion beams are generated by electrohydrodynamic source and are focused in electrostatic ion-optical column. An octupole deflector is used for astigmatism correction and beam deviation. Stabilized power supply of all elements is ensured. Lines of 0.1 μm minimum width are obtained. The micromachining process is controlled by an automated system in CAMAC standard on line with Odrenok computer. Specific features of programmable micromachining and operation of the system in the mode of scanning ion microscope are considered

  4. Micro-machining using a focused ion beam

    International Nuclear Information System (INIS)

    This paper describes the micro-machining of micron and sub-micron scale structures by focused ion beams (FIB). The general requirements for micro-machining systems and the characteristics of FIB milling are considered. A range of applications of FIB milling are also discussed. These include failure analysis and device modification, which are now finding wide use in semiconductor research. Applications in other areas (such as optics and micro-mechanics) are increasing in number, FIB milling being a very flexible and precise method for producing prototype or specialized structures. (Author)

  5. Silicon bulk micromachined hybrid dimensional artifact.

    Energy Technology Data Exchange (ETDEWEB)

    Claudet, Andre A.; Tran, Hy D.; Bauer, Todd Marks; Shilling, Katherine Meghan; Oliver, Andrew David

    2010-03-01

    A mesoscale dimensional artifact based on silicon bulk micromachining fabrication has been developed and manufactured with the intention of evaluating the artifact both on a high precision coordinate measuring machine (CMM) and video-probe based measuring systems. This hybrid artifact has features that can be located by both a touch probe and a video probe system with a k=2 uncertainty of 0.4 {micro}m, more than twice as good as a glass reference artifact. We also present evidence that this uncertainty could be lowered to as little as 50 nm (k=2). While video-probe based systems are commonly used to inspect mesoscale mechanical components, a video-probe system's certified accuracy is generally much worse than its repeatability. To solve this problem, an artifact has been developed which can be calibrated using a commercially available high-accuracy tactile system and then be used to calibrate typical production vision-based measurement systems. This allows for error mapping to a higher degree of accuracy than is possible with a glass reference artifact. Details of the designed features and manufacturing process of the hybrid dimensional artifact are given and a comparison of the designed features to the measured features of the manufactured artifact is presented and discussed. Measurement results from vision and touch probe systems are compared and evaluated to determine the capability of the manufactured artifact to serve as a calibration tool for video-probe systems. An uncertainty analysis for calibration of the artifact using a CMM is presented.

  6. Effects of stray capacitance to ground in bipolar water impedance measurements based on capacitive electrodes

    OpenAIRE

    Pallàs Areny, Ramon; Aliau Bonet, Carles

    2015-01-01

    Liquid impedance measurements based on capacitive (or contactless) electrodes Overcome electrode polarization problems but are affected by stray capacitance from the material being measured to ground, the same as measurements with direct-contact electrodes. This study shows that the effects of that capacitance depend on the impedance being measured and for bipolar impedance measurements they increase when the ratio between that stray capacitance and lectrode capacitance increases.

  7. Ultrasonic assisted-ECAP.

    Science.gov (United States)

    Djavanroodi, F; Ahmadian, H; Koohkan, K; Naseri, R

    2013-08-01

    Equal channel angular pressing (ECAP) is one of the most prominent procedures for achieving ultra-fine grain (UFG) structures among the various severe plastic deformation (SPD) techniques. In this study, the effect of ultrasonic vibration on deformation behavior of commercial pure aluminum in the ECAP process is analyzed successfully using three dimensional (3D) by finite element methods (FEMs). The investigation includes the effects of die geometry, billet length, friction factor, ram speed, ultrasonic amplitude and ultrasonic frequency. Conventional as well as ultrasonic ECAP has been performed on aluminium 1070 alloy and the obtained data were used for validating simulations. It is observed that a 13% reduction in the average force was achieved when ultrasonic vibration with amplitude of 2.5 μm at 20 kHz is applied. Also, further reduction in ECAP forming forces are obtained with increase of vibration amplitude, vibration frequency, friction factor, billet length and die channel angle. PMID:23523093

  8. Ultrasonic decontamination robot

    International Nuclear Information System (INIS)

    An ultrasonic decontamination robot removes radioactive contamination from the internal surface of the inlet and outlet headers, divider plate, tube sheet, and lower portions of tubes of a nuclear power plant steam generator. A programmable microprocessor controller guides the movement of a robotic arm mounted in the header manway. An ultrasonic transducer having a solvent delivery subsystem through which ultrasonic action is achieved is moved by the arm over the surfaces. A solvent recovery suction tube is positioned within the header to remove solvent therefrom while avoiding interference with the main robotic arm. The solvent composition, temperature, pressure, viscosity, and purity are controlled to optimize the ultrasonic scrubbing action. The ultrasonic transducer is controlled at a power density, frequency, and on-off mode cycle such as to optimize scrubbing action within the range of transducer-to-surface distance and solvent layer thickness selected for the particular conditions encountered. Both solvent and transducer control actions are optimized by the programmable microprocessor. (author)

  9. Full-bridge capacitive extensometer

    Science.gov (United States)

    Peters, Randall D.

    1993-08-01

    Capacitive transducers have proven to be very effective sensors of small displacements, because of inherent stability and noninvasive high resolution. The most versatile ones have been those of a differential type, in which two elements are altered in opposite directions in response to change of the system parameter being monitored. Oftentimes, this differential pair has been incorporated into a bridge circuit, which is a useful means for employing synchronous detection to improve signal to noise ratios. Unlike previous differential capacitive dilatometers which used only two active capacitors, the present sensor is a full-bridge type, which is well suited to measuring low-level thermal expansions. This analog sensor is capable of 0.1 μm resolution anywhere within a range of several centimeters, with a linearity of 0.1%. Its user friendly output can be put on a strip chart recorder or directed to a computer for sophisticated data analysis.

  10. Water desalination via capacitive deionization

    OpenAIRE

    Suss, M. E.; Porada, S.; Sun, X.; Biesheuvel, P. M.; Yoon, J.; Presser, V.

    2015-01-01

    Capacitive deionization (CDI) is an emerging technology for the facile removal of charged ionic species from aqueous solutions, and is currently being widely explored for water desalination applications. The technology is based on ion electrosorption at the surface of a pair of electrically charged electrodes, commonly composed of highly porous carbon materials. The CDI community has grown exponentially over the past decade, driving tremendous advances via new cell architectures and system de...

  11. Capacitive de-ionization electrode

    Energy Technology Data Exchange (ETDEWEB)

    Daily, III, William D.

    2013-03-19

    An electrode "cell" for use in a capacitive deionization (CDI) reactor consists of the electrode support structure, a non-reactive conductive material, the electrode accompaniment or substrate and a flow through screen/separator. These "layers" are repeated and the electrodes are sealed together with gaskets between two end plates to create stacked sets of alternating anode and cathode electrodes in the CDI reactor.

  12. Capacitively-Heated Fluidized Bed

    Science.gov (United States)

    Mchale, E. J.

    1982-01-01

    Fluidized-bed chamber in which particles in bed are capacitively heated produces high yields of polycrystalline silicon for semiconductor devices. Deposition of unrecoverable silicon on chamber wall is reduced, and amount of recoverable silicon depositing on seed particles in bed is increased. Particles also have a size and density suitable for direct handling without consolidation, unlike silicon dust produced in heated-wall chambers.

  13. Materials Issues for Micromachines Development - ASCI Program Plan

    Energy Technology Data Exchange (ETDEWEB)

    FANG,HUEI ELIOT; BATTAILE,CORBETT C.; BENAVIDES,GILBERT L.; ENSZ,MARK T.; BUCHHEIT,THOMAS E.; LAVAN,DAVID A.; CHEN,ER-PING; CHRISTENSON,TODD R.; DE BOER,MAARTEN P.; MILLER,SAMUEL L.; DUGGER,MICHAEL T.; PRASAD,SOMURI V.; REEDY JR.,EARL DAVID; THOMPSON,AIDAN P.; WONG,CHUNGNIN C.; YANG,PIN

    2000-05-01

    This report summarizes materials issues associated with advanced micromachines development at Sandia. The intent of this report is to provide a perspective on the scope of the issues and suggest future technical directions, with a focus on computational materials science. Materials issues in surface micromachining (SMM), Lithographic-Galvanoformung-Abformung (LIGA: lithography, electrodeposition, and molding), and meso-machining technologies were identified. Each individual issue was assessed in four categories: degree of basic understanding; amount of existing experimental data capability of existing models; and, based on the perspective of component developers, the importance of the issue to be resolved. Three broad requirements for micromachines emerged from this process. They are: (1) tribological behavior, including stiction, friction, wear, and the use of surface treatments to control these, (2) mechanical behavior at microscale, including elasticity, plasticity, and the effect of microstructural features on mechanical strength, and (3) degradation of tribological and mechanical properties in normal (including aging), abnormal and hostile environments. Resolving all the identified critical issues requires a significant cooperative and complementary effort between computational and experimental programs. The breadth of this work is greater than any single program is likely to support. This report should serve as a guide to plan micromachines development at Sandia.

  14. Proton beam micromachining on PMMA, Foturan and CR-39 materials

    International Nuclear Information System (INIS)

    In this paper we investigate further the potential of proton beam micromachining (PBM) on three different materials: the polymers PMMA and CR-39, and the photowritable glass Foturan. A focused beam of 2 MeV protons delivered by the nuclear microprobe of ATOMKI was used to pattern these materials. The parameters of PBM and the obtained structures are presented

  15. Proton beam micromachining on PMMA, Foturan and CR-39 materials

    Energy Technology Data Exchange (ETDEWEB)

    Rajta, I.; Gomez-Morilla, I.; Abraham, M.H.; Kiss, A.Z. E-mail: azkiss@atomki.hu

    2003-09-01

    In this paper we investigate further the potential of proton beam micromachining (PBM) on three different materials: the polymers PMMA and CR-39, and the photowritable glass Foturan. A focused beam of 2 MeV protons delivered by the nuclear microprobe of ATOMKI was used to pattern these materials. The parameters of PBM and the obtained structures are presented.

  16. Crystallographic effects during micromachining — A finite-element model

    Science.gov (United States)

    Song, Shin-Hyung; Choi, Woo Chun

    2015-07-01

    Mechanical micromachining is a powerful and effective way for manufacturing small sized machine parts. Even though the micromachining process is similar to the traditional machining, the material behavior during the process is much different. In particular, many researchers report that the basic mechanics of the work material is affected by microstructures and their crystallographic orientations. For example, crystallographic orientations of the work material have significant influence on force response, chip formation and surface finish. In order to thoroughly understand the effect of crystallographic orientations on the micromachining process, finite-element model (FEM) simulating orthogonal cutting process of single crystallographic material was presented. For modeling the work material, rate sensitive single crystal plasticity of face-centered cubic (FCC) crystal was implemented. For the chip formation during the simulation, element deletion technique was used. The simulation model is developed using ABAQUS/explicit with user material subroutine via user material subroutine (VUMAT). Simulations showed that variation of the specific cutting energy at different crystallographic orientations of work material shows significant anisotropy. The developed FEM model can be a useful prediction tool of micromachining of crystalline materials.

  17. Laser micromachining of glass, silicon and ceramics. A review

    Czech Academy of Sciences Publication Activity Database

    Řiháková, L.; Chmelíčková, Hana

    2015-01-01

    Roč. 4, č. 7 (2015), s. 41-49 Institutional support: RVO:68378271 Keywords : micromachining * laser * ablation * manufacturing Subject RIV: BH - Optics, Masers, Laser s http://www.eijst.org.uk/images/frontImages/gallery/Vol._4_No._7/6._41-49.pdf

  18. Femtosecond laser micromachining of a single-crystal superalloy

    Energy Technology Data Exchange (ETDEWEB)

    Feng, Q. [Department of Materials Science and Engineering, University of Michigan, Ann Arbor, MI 48109 (United States)]. E-mail: cqfeng@engin.umich.edu; Picard, Y.N. [Department of Materials Science and Engineering, University of Michigan, Ann Arbor, MI 48109 (United States); Liu, H. [Center for Ultrafast Optical Science, University of Michigan, Ann Arbor, MI 48109 (United States); Yalisove, S.M. [Department of Materials Science and Engineering, University of Michigan, Ann Arbor, MI 48109 (United States); Mourou, G. [Center for Ultrafast Optical Science, University of Michigan, Ann Arbor, MI 48109 (United States); Pollock, T.M. [Department of Materials Science and Engineering, University of Michigan, Ann Arbor, MI 48109 (United States)

    2005-09-15

    Femtosecond laser micromachining of a single crystal superalloy has been investigated. Laser-induced ablation and associated damage was examined by means of scanning electron microscopy and transmission electron microscopy. These studies indicate a complete absence of conventional processing defects in the vicinity of machining area. The residual roughness of the machined surface was in the sub-micron range.

  19. High-aspect-ratio bulk micromachining of titanium.

    Science.gov (United States)

    Aimi, Marco F; Rao, Masa P; MacDonald, Noel C; Zuruzi, Abu Samah; Bothman, David P

    2004-02-01

    Recent process developments have permitted the highly anisotropic bulk micromachining of titanium microelectromechanical systems (MEMS). By using the metal anisotropic reactive ion etching with oxidation (MARIO) process, arbitrarily high-aspect-ratio structures with straight sidewalls and micrometre-scale features have been bulk micromachined into titanium substrates of various thicknesses, ranging from 0.5-mm sheet down to 10-microm free-standing titanium foils. Bulk micromachined structures are generally free of residual stresses and are preferred when large, rigid, flat and/or high-force actuators are desired. However, so far there has been a limited ability to select materials on the basis of specific application in bulk micromachining, primarily because of the predominance of MEMS processes dedicated to single-crystal silicon, such as silicon deep reactive ion etching. The MARIO process permits the creation of bulk titanium MEMS, which offers potential for the use of a set of material properties beyond those provided by traditional semiconductor-based MEMS. Consequently, the MARIO process enables the fabrication of novel devices that capitalize on these assets to yield enhanced functionalities that would not be possible with traditional micromechanical material systems. PMID:14743212

  20. Fabrication of Beam Homogenizers in Quartz by Laser Micromachining

    Energy Technology Data Exchange (ETDEWEB)

    Kopitkovas, G.; Lippert, T.; David, C.; Gobrecht, J.; Wokaun, A.

    2004-03-01

    A one step micromachining process, which utilizes laser assisted chemical wet etching and projection of a diffractive gray tone phase masks is applied to fabricate 3 - dimensional microstructures (such as planoconvex or Fresnel microlenses) in UV transparent materials. Arrays of microlenses in quartz are tested as a beam homogenizers for quadrupled Nd:YAG laser. (author)

  1. Femtosecond laser micromachining of silicon with an external electric field

    International Nuclear Information System (INIS)

    Femtosecond (fs) lasers have been shown to be superior to long-pulse lasers in micromachining a wide range of materials. The ultrashort pulses and their extremely high peak power lead to minimum thermal energy diffusion into the material and ensure fast heating and vaporizing of materials with reduced melting. Therefore, fs laser micromachining results in a much reduced heat-affected zone of the machined surfaces. However, plasma generation is normally associated with fs laser processing due to the substrate material breakdown. The plasma cloud may fall back onto the substrate as debris on the surface. In the case of fs laser micromachining of silicon (Si), a large number of micro/nano-sized particles are observed on the Si surface. Some of the particles are loose particles that can be easily removed. The remaining particles are however bonded to the substrate that cannot be cleaned off. For microelectronics applications, such surface contaminants affect the reliability of the device and have to be avoided. In our study, we employed an external electric field during the fs laser micromachining. It was found that the external electric field strength had a significant effect on the cleanliness of the machined Si surface. (technical note)

  2. A two-dimensional electromechanical composite plate model for piezoelectric micromachined ultrasonic transducers (pMUTs)

    International Nuclear Information System (INIS)

    A two-dimensional composite plate model was developed as part of the design methodology for micro-scale thin membrane structures in general and pMUTs in particular. The model was compared with a one-dimensional beam model developed earlier and experimental measurements. The two-dimensional model was shown to converge to the one-dimensional model for the structures with a large aspect ratio. Compared to the experimental data, the qualitative trends regarding the dependence of transducer performance on the aspect ratio predicted by the model were validated by the experimental measurements in all cases except that of the electromechanical coupling factor k2eff. The quantitative agreement between model and experimental data was quite good for all parameters at a transducer width of 180 µm, and became worse as the transducer width became smaller. The resonance frequency was predicted very well by the model, and did not depend on the aspect ratio. With the enhanced flexibility provided by the two-dimensional model, some optimization study was also performed. It was found that among different geometries, a square membrane, i.e. a membrane with the aspect ratio equal to 1, appears to have the highest effective coupling coefficient. On the other hand, for a given square membrane, the electrode which covers about 25% of the membrane, i.e. 50% of the width and length measured from the center, possesses the optimized coupling coefficient. In practice, the model can be used to first optimize the dimension of the membrane for pMUTs to obtain the targeted frequencies and then the electrode coverage area for optimized coupling coefficient

  3. Micromachined silicon parallel acoustic delay lines as time-delayed ultrasound detector array for real-time photoacoustic tomography

    Science.gov (United States)

    Cho, Y.; Chang, C.-C.; Wang, L. V.; Zou, J.

    2016-02-01

    This paper reports the development of a new 16-channel parallel acoustic delay line (PADL) array for real-time photoacoustic tomography (PAT). The PADLs were directly fabricated from single-crystalline silicon substrates using deep reactive ion etching. Compared with other acoustic delay lines (e.g., optical fibers), the micromachined silicon PADLs offer higher acoustic transmission efficiency, smaller form factor, easier assembly, and mass production capability. To demonstrate its real-time photoacoustic imaging capability, the silicon PADL array was interfaced with one single-element ultrasonic transducer followed by one channel of data acquisition electronics to receive 16 channels of photoacoustic signals simultaneously. A PAT image of an optically-absorbing target embedded in an optically-scattering phantom was reconstructed, which matched well with the actual size of the imaged target. Because the silicon PADL array allows a signal-to-channel reduction ratio of 16:1, it could significantly simplify the design and construction of ultrasonic receivers for real-time PAT.

  4. An approach to evaluate capacitance, capacitive reactance and resistance of pivoted pads of a thrust bearing

    Science.gov (United States)

    Prashad, Har

    1992-07-01

    A theoretical approach is developed for determining the capacitance and active resistance between the interacting surfaces of pivoted pads and thrust collar, under different conditions of operation. It is shown that resistance and capacitive reactance of a thrust bearing decrease with the number of pads times the values of these parameters for an individual pad, and that capacitance increases with the number of pads times the capacitance of an individual pad. The analysis presented has a potential to diagnose the behavior of pivoted pad thrust bearings with the angle of tilt and the ratio of film thickness at the leading to trailing edge, by determining the variation of capacitance, resistance, and capacitive reactance.

  5. Ultrasonic liquid level detector

    Science.gov (United States)

    Kotz, Dennis M.; Hinz, William R.

    2010-09-28

    An ultrasonic liquid level detector for use within a shielded container, the detector being tubular in shape with a chamber at its lower end into which liquid from in the container may enter and exit, the chamber having an ultrasonic transmitter and receiver in its top wall and a reflector plate or target as its bottom wall whereby when liquid fills the chamber a complete medium is then present through which an ultrasonic wave may be transmitted and reflected from the target thus signaling that the liquid is at chamber level.

  6. Ultrasonic washing of textiles.

    Science.gov (United States)

    Choi, Junhee; Kim, Tae-Hong; Kim, Ho-Young; Kim, Wonjung

    2016-03-01

    We present the results of experimental investigation of ultrasonic washing of textiles. The results demonstrate that cavitation bubbles oscillating in acoustic fields are capable of removing soils from textiles. Since the washing performance is mitigated in a large washing bath when using an ultrasonic transducer, we propose a novel washing scheme by combining the ultrasonic vibration with a conventional washing method utilizing kinetic energy of textiles. It is shown that the hybrid washing scheme achieves a markedly enhanced performance up to 15% in comparison with the conventional washing machine. This work can contribute to developing a novel laundry machine with reduced washing time and waste water. PMID:26215790

  7. Capacitance enhancement via electrode patterning.

    Science.gov (United States)

    Ho, Tuan A; Striolo, Alberto

    2013-11-28

    The necessity of increasing the energy density in electric double layer capacitors to meet current demand is fueling fundamental and applied research alike. We report here molecular dynamics simulation results for aqueous electrolytes near model electrodes. Particular focus is on the effect of electrode patterning on the structure of interfacial electrolytes, and on the potential drop between the solid electrodes and the bulk electrolytes. The latter is estimated by numerically integrating the Poisson equation using the charge densities due to water and ions accumulated near the interface as input. We considered uniform and patterned electrodes, both positively and negatively charged. The uniformly charged electrodes are modeled as graphite. The patterned ones are obtained by removing carbon atoms from the top-most graphene layer, yielding nanoscopic squares and stripes patterns. For simplicity, the patterned electrodes are effectively simulated as insulators (the charge remains localized on the top-most layer of carbon atoms). Our simulations show that the patterns alter the structure of water and the accumulation of ions at the liquid-solid interfaces. Using aqueous NaCl solutions, we found that while the capacitance calculated for three positively charged electrodes did not change much, that calculated for the negatively charged electrodes significantly increased upon patterning. We find that both water structure and orientation, as well as ion accumulation affect the capacitance. As electrode patterning affects differently water structure and ion accumulation, it might be possible to observe ion-specific effects. These results could be useful for advancing our understanding of electric double layer capacitors, capacitive desalination processes, as well as of fundamental interfacial electrolytes properties. PMID:24289370

  8. Dual Cryogenic Capacitive Density Sensor

    Science.gov (United States)

    Youngquist, Robert; Mata, Carlos; Vokrot, Peter; Cox, Robert

    2009-01-01

    A dual cryogenic capacitive density sensor has been developed. The device contains capacitive sensors that monitor two-phase cryogenic flow density to within 1% accuracy, which, if temperature were known, could be used to determine the ratio of liquid to gas in the line. Two of these density sensors, located a known distance apart, comprise the sensor, providing some information on the velocity of the flow. This sensor was constructed as a proposed mass flowmeter with high data acquisition rates. Without moving parts, this device is capable of detecting the density change within a two-phase cryogenic flow more than 100 times a second. Detection is enabled by a series of two sets of five parallel plates with stainless steel, cryogenically rated tubing. The parallel plates form the two capacitive sensors, which are measured by electrically isolated digital electronics. These capacitors monitor the dielectric of the flow essentially the density of the flow and can be used to determine (along with temperature) the ratio of cryogenic liquid to gas. Combining this information with the velocity of the flow can, with care, be used to approximate the total two-phase mass flow. The sensor can be operated at moderately high pressures and can be lowered into a cryogenic bath. The electronics have been substantially improved over the older sensors, incorporating a better microprocessor, elaborate ground loop protection and noise limiting circuitry, and reduced temperature sensitivity. At the time of this writing, this design has been bench tested at room temperature, but actual cryogenic tests are pending

  9. Ultrasonic testing X gammagraphy

    International Nuclear Information System (INIS)

    The experience of 10 years for substituting gammagraphy tests by ultrasonic tests is related. A comparative evaluation of data obtained from both techniques applied to welded butt joints is presented. (author)

  10. Nucleotide Capacitance Calculation for DNA Sequencing

    OpenAIRE

    Lu, Jun-Qiang; Zhang, X.-G.

    2008-01-01

    Using a first-principles linear response theory, the capacitance of the DNA nucleotides, adenine, cytosine, guanine, and thymine, are calculated. The difference in the capacitance between the nucleotides is studied with respect to conformational distortion. The result suggests that although an alternate current capacitance measurement of a single-stranded DNA chain threaded through a nanogap electrode may not be sufficient to be used as a standalone method for rapid DNA sequencing, the capaci...

  11. Electrical Capacitance Volume Tomography: Design and Applications

    OpenAIRE

    Warsito Warsito; Liang-Shih Fan; Qussai Marashdeh; Fei Wang

    2010-01-01

    This article reports recent advances and progress in the field of electrical capacitance volume tomography (ECVT). ECVT, developed from the two-dimensional electrical capacitance tomography (ECT), is a promising non-intrusive imaging technology that can provide real-time three-dimensional images of the sensing domain. Images are reconstructed from capacitance measurements acquired by electrodes placed on the outside boundary of the testing vessel. In this article, a review of progress on capa...

  12. Electrochemical capacitance of a leaky nanocapacitor

    OpenAIRE

    Zhao, X; Guo, H; Wang, J.

    1999-01-01

    We report a detailed theoretical investigation on electrochemical capacitance of a nanoscale capacitor where there is a DC coupling between the two conductors. For this ``leaky'' quantum capacitor, we have derived general analytic expressions of the linear and second order nonlinear electrochemical capacitance within a first principles quantum theory in the discrete potential approximation. Linear and nonlinear capacitance coefficients are also derived in a self-consistent manner without the ...

  13. Flexible PVDF ferroelectric capacitive temperature sensor

    KAUST Repository

    Khan, Naveed

    2015-08-02

    In this paper, a capacitive temperature sensor based on polyvinylidene fluoride (PVDF) capacitor is explored. The PVDF capacitor is characterized below its Curie temperature. The capacitance of the PVDF capacitor changes vs temperature with a sensitivity of 16pF/°C. The linearity measurement of the capacitance-temperature relation shows less than 0.7°C error from a best fit straight line. An LC oscillator based temperature sensor is demonstrated based on this capacitor.

  14. Fundamentals of Medical Ultrasonics

    CERN Document Server

    Postema, Michiel

    2011-01-01

    This book sets out the physical and engineering principles of acoustics and ultrasound as used for medical applications. It covers the basics of linear acoustics, wave propagation, non-linear acoustics, acoustic properties of tissue, transducer components, and ultrasonic imaging modes, as well as the most common diagnostic and therapeutic applications. It offers students and professionals in medical physics and engineering a detailed overview of the technical aspects of medical ultrasonic imaging, whilst serving as a reference for clinical and research staff.

  15. Assessing ultrasonic examination results

    International Nuclear Information System (INIS)

    Amongst nondestructive examination methods, the ultrasonic examination plays an important role. The reason why its scope of application is so wide is because the sound conducting capacity is the only property the material of a test specimen has to have. As the fields are so manifold, only main aspects can be described briefly. The list of references, however, is very extensive and gives plenty of information of all the problems concerning the assessment of ultrasonic examination results. (orig./RW)

  16. Detection of Telomerase Activity Using Capacitance Measurements

    Science.gov (United States)

    Kang, Bong Keun; Lee, Ri Mi; Choi, Ahmi; Jung, Hyo-Il; Yoo, Kyung-Hwa

    2007-03-01

    Telomerase activity has been found in about 85% cancer cells, while no activity observed in normal cells, so that telomerase has been proposed as a marker for cancer detection. Here, we describe electrical detection of telomerase activity using capacitance measurements. We have investigated the length dependence of capacitance on DNA solutions and found that the capacitance of DNA solutions were dependent on the DNA length. In addition, upon adding telomerase into the solution of telomeric substrate primer, the capacitance was observed to change as a function of time due to the telomeric elongation. These results suggest that this novel nanosensor may be used for rapid detection of telomerase activity.

  17. Module Eleven: Capacitance; Basic Electricity and Electronics Individualized Learning System.

    Science.gov (United States)

    Bureau of Naval Personnel, Washington, DC.

    In this module the student will learn about another circuit quantity, capacitance, and discover the effects of this component on circuit current, voltage, and power. The module is divided into seven lessons: the capacitor, theory of capacitance, total capacitance, RC (resistive-capacitive circuit) time constant, capacitive reactance, phase and…

  18. Capacitance Measurement with a Sigma Delta Converter for 3D Electrical Capacitance Tomography

    Science.gov (United States)

    Nurge, Mark

    2005-01-01

    This paper will explore suitability of a newly available capacitance to digital converter for use in a 3D Electrical Capacitance Tomography system. A switch design is presented along with circuitry needed to extend the range of the capacitance to digital converter. Results are then discussed for a 15+ hour drift and noise test.

  19. Ultrahigh Temperature Capacitive Pressure Sensor

    Science.gov (United States)

    Harsh, Kevin

    2014-01-01

    Robust, miniaturized sensing systems are needed to improve performance, increase efficiency, and track system health status and failure modes of advanced propulsion systems. Because microsensors must operate in extremely harsh environments, there are many technical challenges involved in developing reliable systems. In addition to high temperatures and pressures, sensing systems are exposed to oxidation, corrosion, thermal shock, fatigue, fouling, and abrasive wear. In these harsh conditions, sensors must be able to withstand high flow rates, vibration, jet fuel, and exhaust. In order for existing and future aeropropulsion turbine engines to improve safety and reduce cost and emissions while controlling engine instabilities, more accurate and complete sensor information is necessary. High-temperature (300 to 1,350 C) capacitive pressure sensors are of particular interest due to their high measurement bandwidth and inherent suitability for wireless readout schemes. The objective of this project is to develop a capacitive pressure sensor based on silicon carbon nitride (SiCN), a new class of high-temperature ceramic materials, which possesses excellent mechanical and electric properties at temperatures up to 1,600 C.

  20. Response of piezoelectric laminated micro plates under the excitation of an ultrasonic wave

    Science.gov (United States)

    Kang, Xin; Dong, Shuai

    2016-01-01

    This study presents the electromechanical response of a piezoelectric laminated micro plate under the excitation of an ultrasonic wave. The laminated plate consists of a piezoelectric layer (AlN), an elastic layer (SiO2) and two electrode layers (Au and Pt). Since the whole thickness of the plate is in micro scale, the size dependence of the dynamic behavior of the laminated plate is evaluated using the couple stress theory. The results show that the bending rigidity of the micro plate increases when the size effect is considered and the amplitudes of output of electric charge and voltage are reduced accordingly when the plate is excited by ultrasonic wave. Also the resonant frequency of the laminated plate increase because of the enhancement of the bending rigidity of the plate. The analysis results can provide a reference for the design of micromachined piezoelectric sensors.

  1. Self-sacrificial surface micromachining using poly(methyl methacrylate)

    International Nuclear Information System (INIS)

    This paper explains the idea of self-sacrificial surface micromachining. In a self-sacrificial process, there is no distinction between structural and sacrificial layers. Instead, during patterning, an in situ chemical change converts a structural material into a sacrificial material, or vice versa. This greatly increases the design space of a self-sacrificial process when compared to a traditional process with the same number of layers, as all layers can be used simultaneously for both structural and sacrificial purposes. To show the possibility of self-sacrificial surface micromachining, a concrete implementation was developed using poly(methyl methacrylate) (PMMA) as the material. Unexposed PMMA, with a high average molecular weight, was used as the structural material. Exposed PMMA, with a lower average molecular weight, was used as the sacrificial material. The in situ chemical change was caused by deep-UV irradiation at 254 nm

  2. Cytotoxicity of implantable microelectrode arrays produced by laser micromachining.

    Science.gov (United States)

    Green, Rylie A; Ordonez, Juan S; Schuettler, Martin; Poole-Warren, Laura A; Lovell, Nigel H; Suaning, Gregg J

    2010-02-01

    Implantable high-density microelectrode arrays have been successfully fabricated using laser micromachining of conventional implant materials, polydimethylsiloxane (PDMS) and platinum (Pt) foil. This study investigates the impact of modifying PDMS and Pt with high power laser beams and the possible toxicity of by-products that may remain on the implantable device. Materials were characterised both chemically and biologically through x-ray photoelectron spectroscopy (XPS), cell growth inhibition assays and a direct contact cell proliferation assay. It was found that laser micromachining produces oxides of silicon and platinum on the PDMS and Pt respectively. While the chemical properties of materials were altered, there was negligible change in the biological response to either extracts or cell growth directly on the composite electrode array. PMID:19833388

  3. Femtosecond Laser Micromachining Photonic and Microfluidic Devices in Transparent Materials

    CERN Document Server

    Cerullo, Giulio; Ramponi, Roberta

    2012-01-01

    Femtosecond laser micromachining of transparent material is a powerful and versatile technology. In fact, it can be applied to several materials. It is a maskless technology that allows rapid device prototyping, has intrinsic three-dimensional capabilities and can produce both photonic and microfluidic devices. For these reasons it is ideally suited for the fabrication of complex microsystems with unprecedented functionalities. The book is mainly focused on micromachining of transparent materials which, due to the nonlinear absorption mechanism of ultrashort pulses, allows unique three-dimensional capabilities and can be exploited for the fabrication of complex microsystems with unprecedented functionalities.This book presents an overview of the state of the art of this rapidly emerging topic with contributions from leading experts in the field, ranging from principles of nonlinear material modification to fabrication techniques and applications to photonics and optofluidics.

  4. Proton beam micromachining on strippable aqueous base developable negative resist

    Energy Technology Data Exchange (ETDEWEB)

    Rajta, I. [Institute of Nuclear Research of the Hungarian Academy of Sciences, H-4001 Debrecen, P.O. Box 51 (Hungary)]. E-mail: rajta@atomki.hu; Baradacs, E. [University of Debrecen, Department of Environmental Physics, H-4026 Debrecen, Poroszlay u. 6 (Hungary); Chatzichristidi, M. [Institute of Microelectronics, NCSR-' Demokritos' , POB 62230, 153 10 Ag. Paraskevi (Greece); Valamontes, E.S. [Department of Electronics Technological Educational Institute of Athens, 12210 Aegaleo (Greece); Uzonyi, I. [Institute of Nuclear Research of the Hungarian Academy of Sciences, H-4001 Debrecen, P.O. Box 51 (Hungary); Raptis, I. [Institute of Microelectronics, NCSR-' Demokritos' , POB 62230, 153 10 Ag. Paraskevi (Greece)

    2005-04-01

    Nowadays a significant amount of research effort is devoted to the development of technologies for the fabrication of microcomponents and microsystems worldwide. In certain applications of micromachining high aspect ratio (HAR) structures are required. However, the resist materials used in HAR technologies are usually not compatible with the IC fabrication, either because they cannot be stripped away or because they are developed in organic solvents. In the present work the application of a novel chemically amplified resist for proton beam micromachining is presented. The resist based on epoxy and polyhydroxystyrene polymers is developed in the IC standard aqueous developers. The exposed areas can be stripped away using conventional organic stripping solutions. In order to test the exposure dose sensitivity and the lateral resolution, various test structures were irradiated. Using this formulation 5-8 {mu}m wide lines with aspect ratio 4-6 were resolved.

  5. Proton beam micromachining on strippable aqueous base developable negative resist

    International Nuclear Information System (INIS)

    Nowadays a significant amount of research effort is devoted to the development of technologies for the fabrication of microcomponents and microsystems worldwide. In certain applications of micromachining high aspect ratio (HAR) structures are required. However, the resist materials used in HAR technologies are usually not compatible with the IC fabrication, either because they cannot be stripped away or because they are developed in organic solvents. In the present work the application of a novel chemically amplified resist for proton beam micromachining is presented. The resist based on epoxy and polyhydroxystyrene polymers is developed in the IC standard aqueous developers. The exposed areas can be stripped away using conventional organic stripping solutions. In order to test the exposure dose sensitivity and the lateral resolution, various test structures were irradiated. Using this formulation 5-8 μm wide lines with aspect ratio 4-6 were resolved

  6. Deep ultraviolet laser micromachining of novel fibre optic devices

    Energy Technology Data Exchange (ETDEWEB)

    Li, J [The Edward S. Rogers Sr. Department of Electrical and Computer Engineering, University of Toronto, 10 King' s College Road, Ontario M5S 3G4 (Canada); Dou, J [The Edward S. Rogers Sr. Department of Electrical and Computer Engineering, University of Toronto, 10 King' s College Road, Ontario M5S 3G4 (Canada); Herman, P R [The Edward S. Rogers Sr. Department of Electrical and Computer Engineering, University of Toronto, 10 King' s College Road, Ontario M5S 3G4 (Canada); Fricke-Begemann, T [Laser-Laboratorium Goettingen e.V., D-37077 Goettingen (Germany); Ihlemann, J [Laser-Laboratorium Goettingen e.V., D-37077 Goettingen (Germany); Marowsky, G [Laser-Laboratorium Goettingen e.V., D-37077 Goettingen (Germany)

    2007-04-15

    A deep ultraviolet F{sub 2} laser, with output at 157-nm wavelength, has been adopted for micro-shaping the end facets of single and multi-mode silica optical fibres. The high energy 7.9-eV photons drive strong interactions in the wide-bandgap silica fibres to enable the fabrication of surface-relief microstructures with high spatial resolution and smooth surface morphology. Diffraction gratings, focusing lenses, and Mach-Zehnder interferometric structures have been micromachined onto the cleaved-fibre facets and optically characterized. F{sub 2}-laser micromachining is shown to be a rapid and facile means for direct-writing of novel infibre photonic components.

  7. Polydimethylglutarimide (PMGI) as a structural material for surface micromachining

    International Nuclear Information System (INIS)

    This work investigates the use of polydimethylglutarimide, or PMGI, as a structural material for surface micromachining. PMGI is a commercially available, positive-toned deep-UV resist designed for use in bi-layer lift-off techniques. This paper presents a technique for the microfabrication of free-standing PMGI structures, and uses those structures to extract the coefficient of thermal expansion and Young's modulus for PMGI. Our study found PMGI's coefficient of thermal expansion to be 56 ± 6 ppm °C−1 and Young's modulus to be 5.0 ± 0.5 GPa. Active structures were also fabricated by including a patterned metal layer. This allows the fabrication of active devices, such as bent-beam actuators. PMGI is a commercially available polymer being used in micromachining, and this paper provides the first report of its thermo-mechanical properties

  8. Femtosecond pulsed laser micromachining of glass substrates with application to microfluidic devices.

    Science.gov (United States)

    Giridhar, Malalahalli S; Seong, Kibyung; Schülzgen, Axel; Khulbe, Pramod; Peyghambarian, Nasser; Mansuripur, Masud

    2004-08-10

    We describe a technique for surface and subsurface micromachining of glass substrates by using tightly focused femtosecond laser pulses at a wavelength of 1660 nm. A salient feature of pulsed laser micromachining is its ability to drill subsurface tunnels into glass substrates. To demonstrate a potential application of this micromachining technique, we fabricate simple microfluidic structures on a glass plate. The use of a cover plate that seals the device by making point-to-point contact with the flat surface of the substrate is necessary to prevent the evaporation of liquids in open channels and chambers. Methods for protecting and sealing the micromachined structures for microfluidic applications are discussed. PMID:15376436

  9. A Silicon Micromachined Gyroscope Driven by the Rotating Carrier Self

    Institute of Scientific and Technical Information of China (English)

    Fuxue Zhang; Xu Mao; Yu Liu; Nan Zhang; Wei Zhang

    2006-01-01

    This paper reported a silicon micromachined gyroscope which is driven by the rotating carrier's angular velocity, the silicon was manufactured by anisotropy etching. The design, fabrication and packing of the sensing element were introduced in the paper. The imitation experimentation and performance test have certificated that the principle of the gyroscope is correct and the gyroscope can be used to sense yawing or pitching angular velocity of the rotating carrier, and the angular velocity of the rotating carrier itself.

  10. Terahertz antennas with silicon micromachined front-end

    OpenAIRE

    Chattopadhyay, Goutam; Reck, Theodore; Jung Kubiak, Cecile; Lee, Choonsup; Siles, Jose Vicente; Chahat, Naser; Cooper, Ken; Schlecht, Erich T.; Alonso del Pino, María; Mehdi, Imran

    2014-01-01

    Increasingly, terahertz systems are being used for multi-pixel receivers for different applications from mapping the star-forming regions of galaxies to stand-off radar imaging. Since microstrip patch antennas are too lossy and corrugated horn antenna arrays are difficult to machine at terahertz frequencies, suitable antenna array designs have been one of the key area of research for this field. Moreover, silicon micromachined waveguide housing for front-end integration is becoming very popul...

  11. High-speed Laser Micromachining with Copper Bromide Laser

    CERN Document Server

    Balchev, I I; Minkovski, N I; Sabotinov, N V; Balchev, Ivaylo I.; Kostadinov, Ivan K.; Minkovski, Nikolai I.; Sabotinov, Nikola V.

    2006-01-01

    The application of the copper bromide (CuBr) laser as an attractive tool in the micro-machining of different materials has been demonstrated. High-quality drilling by trepanning and precision cutting was established on several materials with a negligible heat-affected zone (HAZ). That good performance was a result of the combination of high power visible radiation, short pulses, and close to the diffraction-limited laser beam quality with high-speed galvo scanner beam steering.

  12. High speed in situ depth profiling of ultrafast micromachining.

    Science.gov (United States)

    Webster, Paul J L; Muller, Matthew S; Fraser, James M

    2007-11-12

    We demonstrate real-time depth profiling of ultrafast micromachining of stainless steel at scan rates of 46 kHz. The broad bandwidth and high power of the light source allows for simultaneous machining and coaxial Fourier-domain interferometric imaging of the ablation surface with depth resolutions of 6 mum. Since the same light is used to machine as to probe, spatial and temporal synchronization are automatic. PMID:19550777

  13. Artificial intelligence: Collective behaviors of synthetic micromachines

    Science.gov (United States)

    Duan, Wentao

    Synthetic nano- and micromotors function through the conversion of chemical free energy or forms of energy into mechanical motion. Ever since the first reports, such motors have been the subject of growing interest. In addition to motility in response to gradients, these motors interact with each other, resulting in emergent collective behavior like schooling, exclusion, and predator-prey. However, most of these systems only exhibit a single type of collective behavior in response to a certain stimuli. The research projects in the disseratation aim at designing synthetic micromotors that can exhibit transition between various collective behaviors in response to different stimuli, as well as quantitative understanding on the pairwise interaction and propulsion mechanism of such motors. Chapter 1 offers an overview on development of synthetic micromachines. Interactions and collective behaviors of micromotors are also summarized and included. Chapter 2 presents a silver orthophosphate microparticle system that exhibits collective behaviors. Transition between two collective patterns, clustering and dispersion, can be triggered by shift in chemical equilibrium upon the addition or removal of ammonia, in response to UV light, or under two orthogonal stimuli (UV and acoustic field) and powering mechanisms. The transitions can be explained by the self-diffusiophoresis mechanism resulting from either ionic or neutral solute gradients. Potential applications of the reported system in logic gates, microscale pumping, and hierarchical assembly have been demonstrated. Chapter 3 introduces a self-powered oscillatory micromotor system in which active colloids form clusters whose size changes periodically. The system consists of an aqueous suspension of silver orthophosphate particles under UV radiation, in the presence of a mixture of glucose and hydrogen peroxide. The colloid particles first attract with each other to form clusters. After a lag time of around 5min, chemical

  14. Ultrasonic communication in frogs.

    Science.gov (United States)

    Feng, Albert S; Narins, Peter M; Xu, Chun-He; Lin, Wen-Yu; Yu, Zu-Lin; Qiu, Qiang; Xu, Zhi-Min; Shen, Jun-Xian

    2006-03-16

    Among vertebrates, only microchiropteran bats, cetaceans and some rodents are known to produce and detect ultrasounds (frequencies greater than 20 kHz) for the purpose of communication and/or echolocation, suggesting that this capacity might be restricted to mammals. Amphibians, reptiles and most birds generally have limited hearing capacity, with the ability to detect and produce sounds below approximately 12 kHz. Here we report evidence of ultrasonic communication in an amphibian, the concave-eared torrent frog (Amolops tormotus) from Huangshan Hot Springs, China. Males of A. tormotus produce diverse bird-like melodic calls with pronounced frequency modulations that often contain spectral energy in the ultrasonic range. To determine whether A. tormotus communicates using ultrasound to avoid masking by the wideband background noise of local fast-flowing streams, or whether the ultrasound is simply a by-product of the sound-production mechanism, we conducted acoustic playback experiments in the frogs' natural habitat. We found that the audible as well as the ultrasonic components of an A. tormotus call can evoke male vocal responses. Electrophysiological recordings from the auditory midbrain confirmed the ultrasonic hearing capacity of these frogs and that of a sympatric species facing similar environmental constraints. This extraordinary upward extension into the ultrasonic range of both the harmonic content of the advertisement calls and the frog's hearing sensitivity is likely to have co-evolved in response to the intense, predominantly low-frequency ambient noise from local streams. Because amphibians are a distinct evolutionary lineage from microchiropterans and cetaceans (which have evolved ultrasonic hearing to minimize congestion in the frequency bands used for sound communication and to increase hunting efficacy in darkness), ultrasonic perception in these animals represents a new example of independent evolution. PMID:16541072

  15. Micromachined nanofiltration modules for lab-on-a-chip applications

    International Nuclear Information System (INIS)

    In this paper, we present a new concept of particle filtration modules for lab-on-a-chip (LOC) devices. The modules are designed as vertical walls that separate fluidic micro channels. In these walls, nano channels that connect the two adjacent micro channels are embedded. Fluid and small particles can penetrate the walls through the embedded nano channels, while particles larger than the nano channels size will be stopped. By keeping the fluid in the surface plane of the LOC, the module can be easily integrated with other LOC modules. To fabricate these modules, we use chemical vapor deposition to deposit nanometer thick sacrificial layers and embed them into the wall structure. Wet chemical enchants are used to remove the sacrificial layers and form the nano channels. This fabrication process can generate 100 nm−1 μm high nano channels with high accuracy and uniformity with well-established micromachining techniques. Two types of modules, surface micromachining design for more flexibility in the choice of substrate material and bulk micromachining design for higher porosity without increasing footprint, are fabricated and successfully tested. (paper)

  16. Micromachined nanofiltration modules for lab-on-a-chip applications

    Science.gov (United States)

    Shen, C.; Mokkapati, V. R. S. S.; Pham, H. T. M.; Sarro, P. M.

    2012-02-01

    In this paper, we present a new concept of particle filtration modules for lab-on-a-chip (LOC) devices. The modules are designed as vertical walls that separate fluidic micro channels. In these walls, nano channels that connect the two adjacent micro channels are embedded. Fluid and small particles can penetrate the walls through the embedded nano channels, while particles larger than the nano channels size will be stopped. By keeping the fluid in the surface plane of the LOC, the module can be easily integrated with other LOC modules. To fabricate these modules, we use chemical vapor deposition to deposit nanometer thick sacrificial layers and embed them into the wall structure. Wet chemical enchants are used to remove the sacrificial layers and form the nano channels. This fabrication process can generate 100 nm-1 μm high nano channels with high accuracy and uniformity with well-established micromachining techniques. Two types of modules, surface micromachining design for more flexibility in the choice of substrate material and bulk micromachining design for higher porosity without increasing footprint, are fabricated and successfully tested.

  17. Micromachining of polydimethylsiloxane induced by laser plasma EUV light

    Science.gov (United States)

    Torii, S.; Makimura, T.; Okazaki, K.; Nakamura, D.; Takahashi, A.; Okada, T.; Niino, H.; Murakami, K.

    2011-06-01

    Polydimethylsiloxane (PDMS) is fundamental materials in the field of biotechnology. Because of its biocompatibility, microfabricated PDMS sheets are applied to micro-reactors and microchips for cell culture. Conventionally, the microstructures were fabricated by means of cast or imprint using molds, however it is difficult to fabricate the structures at high aspect ratios such as through-holes/vertical channels. The fabrication of the high-aspect structures would enable us to stack sheets to realize 3D fluidic circuits. In order to achieve the micromachining, direct photo-ablation by short wavelength light is promising. In the previous works, we investigated ablation of transparent materials such as silica glass and poly(methyl methacrylate) induced by irradiation with laser plasma EUV light. We achieved smooth and fine nanomachining. In this work, we applied our technique to PDMS micromachining. We condensed the EUV light onto PDMS surfaces at high power density up to 108 W/cm2 using a Au coated ellipsoidal mirror. We found that PDMS sheet was ablated at a rate up to 440 nm/shot. It should be emphasized that through hole with a diameter of 1 μm was fabricated in a PDMS sheet with a thickness of 4 μm. Thus we demonstrated the micromachining of PDMS sheets using laser plasma EUV light.

  18. Micromachining of semiconductor materials by focused ion beams

    International Nuclear Information System (INIS)

    A Ga+ focused ion beam (FIB) has been used to micromachine semiconductor materials, including III-V compounds. The FIB was operated at 10 keV; (100) substrates of InP, GaAs and Si and epilayers of Ga0.46In0.54As and Ga0.2In0.8As0.4P0.6 grown by metal organic chemical vapour deposition (MOCVD) on (100) InP substrates were used for the micromachining experiments. Large area, rectangular wells with different depths were micromachined in the above, from which material removal rates have been derived using Talysurf profiling and SEM examination, and sputter yields deduced. The uniformity in removal rates with respect to depth has also been examined. In addition, results for clear end-point signals, using sample absorbed current have been established for Ga0.46In0.54As-InP and Ga0.2In0.8As0.4P0.6-InP interfaces. (author)

  19. Vascular tissue engineering by computer-aided laser micromachining.

    Science.gov (United States)

    Doraiswamy, Anand; Narayan, Roger J

    2010-04-28

    Many conventional technologies for fabricating tissue engineering scaffolds are not suitable for fabricating scaffolds with patient-specific attributes. For example, many conventional technologies for fabricating tissue engineering scaffolds do not provide control over overall scaffold geometry or over cell position within the scaffold. In this study, the use of computer-aided laser micromachining to create scaffolds for vascular tissue networks was investigated. Computer-aided laser micromachining was used to construct patterned surfaces in agarose or in silicon, which were used for differential adherence and growth of cells into vascular tissue networks. Concentric three-ring structures were fabricated on agarose hydrogel substrates, in which the inner ring contained human aortic endothelial cells, the middle ring contained HA587 human elastin and the outer ring contained human aortic vascular smooth muscle cells. Basement membrane matrix containing vascular endothelial growth factor and heparin was to promote proliferation of human aortic endothelial cells within the vascular tissue networks. Computer-aided laser micromachining provides a unique approach to fabricate small-diameter blood vessels for bypass surgery as well as other artificial tissues with complex geometries. PMID:20308108

  20. Bulk micromachining of Si by metal-assisted chemical etching.

    Science.gov (United States)

    Kim, Sang-Mi; Khang, Dahl-Young

    2014-09-24

    Bulk micromachining of Si is demonstrated by the well-known metal-assisted chemical etching (MaCE). Si microstructures, having lateral dimension from 5 μm up to millimeters, are successfully sculpted deeply into Si substrate, as deep as >100 μm. The key ingredient of this success is found to be the optimizations of catalyst metal type and its morphology. Combining the respective advantages of Ag and Au in the MaCE as a Ag/Au bilayer configuration leads to quite stable etch reaction upon a prolonged etch duration up to >5 h. Further, the permeable nature of the optimized Ag/Au bilayer metal catalyst enables the etching of pattern features having very large lateral dimension. Problems such as the generation of micro/nanostructures and chemical attacks on the top of pattern surface are successfully overcome by process optimizations such as post-partum sonication treatment and etchant formulation control. The method can also be successful to vertical micromachining of Si substrate having other crystal orientations than Si(100), such as Si(110) and Si(111). The simple, easy, and low-cost nature of present approach may be a great help in bulk micromachining of Si for various applications such as microelectromechanical system (MEMS), micro total analysis system (μTAS), and so forth. PMID:24820931

  1. Proton micromachining of substrate scaffolds for cellular and tissue engineering

    International Nuclear Information System (INIS)

    Three dimensional patterns (grooves and ridges) were micromachined in PMMA using a 600 keV proton beam from the nuclear microscopy facility at the Research Centre for Nuclear Microscopy, National University of Singapore. Swiss 3T3 fibroblasts (ATCC CCL92, Rockville, MD) have been seeded onto these patterns, and the following observations have been made: (a) Cells were not found in the grooves (depth 9 μm, width 6.6 μm); (b) Cells were highly aligned and elongated on narrow ridges (4.2 μm wide), with the degree of alignment and elongation reduced for wider ridges. The underlying mechanism responsible of this cellular behaviour is assumed to be induced by the mechanical restrictions imposed by the topographic features on cellular migration, cell adhesion and concomitant changes in the cytoskeletal. The use of topographical stimuli to regulate cell function is an area of high potential, with implications in the engineering of tissue for spare-part surgery. Proton micromachining, which has the unique advantage of being the only technique capable of direct-write 3D micromachining at sub-cellular dimensions has unique advantages in this area of research

  2. The ultrasonic modification of thermodynamic and kinetic regularity of lithium intercalation in talc$

    Institute of Scientific and Technical Information of China (English)

    O.V. Balaban; I.I. Grygorchak; R.М. Peleshchak; О.V. Kuzyk; О.О. Dan’kiv

    2014-01-01

    Influence of the ultrasound on talc (Mg3Si4O10(OH)2) cathode material was experimentally investigated. The Gibbs' energy change of the Li+-intercalation process, the diffusion coefficient in LixMg3Si4O10(OH)2, the charge transfer resistance and the capacitance of the electric double layer were studied in electrochemical cells, based on initial and ultrasonic treated talc. The obtained results were interpreted within the nonlinear diffusion-deformation model, which involved formation of vacancy nanoclusters under ultrasonic influence at temperatures lower than a critical value.

  3. The Pyramidal Capacitated Vehicle Routing Problem

    DEFF Research Database (Denmark)

    Lysgaard, Jens

    This paper introduces the Pyramidal Capacitated Vehicle Routing Problem (PCVRP) as a restricted version of the Capacitated Vehicle Routing Problem (CVRP). In the PCVRP each route is required to be pyramidal in a sense generalized from the Pyramidal Traveling Salesman Problem (PTSP). A pyramidal...

  4. Dissecting graphene capacitance in electrochemical cell

    International Nuclear Information System (INIS)

    Quantum capacitance of graphene plays a significant role for graphene's applications in electrochemical devices and sensors, while the determination of these basic characters of Dirac point, Fermi energy, quantum capacitance, etc is still a subject of considerable debate in both experiments and simulations. Here, we report joint first-principles/continuum calculations (JFPCCs) on a monolayer graphene electrode immersed in an electrolyte coupled with a reference electrode under an applied potential. The JFPCCs gave the Fermi level, charge density on graphene, Dirac point energy, electrostatic potential, electric double layer etc as a function of the applied potential with respect to the reference electrode. These results revealed the strongly coupled relationship between Fermi level change and Dirac point shift in electrochemical cell. The total capacitance of the electrochemical cell was dissected into the quantum capacitance of the graphene electrode and the capacitance of the electric double layer. Furthermore, simple and analytic formulas were proposed for the three capacitances, which predicted, in sufficient accuracy, the behavior of capacitance versus potential. These findings deepen the understanding of quantum capacitance of graphene, which will stimulate novel experimental and theoretical studies and boost the applications of graphene in electrochemical and energy areas

  5. Quantum capacitance of the monolayer graphene

    OpenAIRE

    Cheremisin, M. V.

    2012-01-01

    The quantum capacitance of the monolayer graphene for arbitrary carrier density, magnetic field and temperature is found. The density dependence of the quantum capacitance is analyzed for magnetic field(temperature) is fixed(varied) and vice versa. The theory is compared with the experimental data.

  6. Capacitance densitometer for flow regime identification

    Science.gov (United States)

    Shipp, Jr., Roy L.

    1978-01-01

    This invention relates to a capacitance densitometer for determining the flow regime of a two-phase flow system. A two-element capacitance densitometer is used in conjunction with a conventional single-beam gamma densitometer to unambiguously identify the prevailing flow regime and the average density of a flowing fluid.

  7. Capacitance-coupled wiper increases potentiometer life

    Science.gov (United States)

    Dimeff, J.

    1968-01-01

    Capacitively-coupled wiper reduces the friction between the sliding contact and the potentiometer element in conventional potentiometers. A small preamplifier employed close to the wiper reduces errors caused by output cable capacitance. The device is friction free with resultant low wear and has high speed and high resolution.

  8. The pyramidal capacitated vehicle routing problem

    DEFF Research Database (Denmark)

    Lysgaard, Jens

    2010-01-01

    This paper introduces the pyramidal capacitated vehicle routing problem (PCVRP) as a restricted version of the capacitated vehicle routing problem (CVRP). In the PCVRP each route is required to be pyramidal in a sense generalized from the pyramidal traveling salesman problem (PTSP). A pyramidal...

  9. Energy-Efficient Capacitive-Sensor Interfaces

    OpenAIRE

    Z. Tan

    2013-01-01

    This thesis describes the theory, design and realization of energy-efficient capacitive-sensor interfaces that are dedicated to energy-constrained applications. The goal of this work is to explore energy-efficient capacitive-sensor interface design techniques both at the system and the circuit level.

  10. Energy-Efficient Capacitive-Sensor Interfaces

    NARCIS (Netherlands)

    Tan, Z.

    2013-01-01

    This thesis describes the theory, design and realization of energy-efficient capacitive-sensor interfaces that are dedicated to energy-constrained applications. The goal of this work is to explore energy-efficient capacitive-sensor interface design techniques both at the system and the circuit level

  11. Micro-Horn Arrays for Ultrasonic Impedance Matching

    Science.gov (United States)

    Rao, Shanti; Palmer, Dean

    2009-01-01

    Thin-layered structures containing arrays of micromachined horns, denoted solid micro-horn arrays (SMIHAs), have been conceived as improved means of matching acoustic impedances between ultrasonic transducers and the media with which the transducers are required to exchange acoustic energy. Typically, ultrasonic transducers (e.g., those used in medical imaging) are piezoelectric or similar devices, which produce small displacements at large stresses. However, larger displacements at smaller stresses are required in the target media (e.g., human tissues) with which acoustic energy is to be exchanged. Heretofore, efficiencies in transmission of acoustic energy between ultrasonic transducers and target media have been severely limited because substantial mismatches of acoustic impedances have remained, even when coupling material layers have been interposed between the transducers and the target media. In contrast, SMIHAs can, in principle, be designed to effect more nearly complete acoustic impedance matching, leading to power transmission efficiencies of 90 percent or even greater. The SMIHA concept is based on extension, into the higher-frequency/ lower-wavelength ultrasonic range, of the use of horns to match acoustic impedances in the audible and lower-frequency ultrasonic ranges. In matching acoustic impedance in transmission from a higher-impedance acoustic source (e.g., a piezoelectric transducer) and a lowerimpedance target medium (e.g., air or human tissue), a horn acts as a mechanical amplifier. The shape and size of the horn can be optimized for matching acoustic impedance in a specified frequency range. A typical SMIHA would consist of a base plate, a face plate, and an array of horns that would constitute pillars that connect the two plates (see figure). In use, the base plate would be connected to an ultrasonic transducer and the face plate would be placed in contact with the target medium. As at lower frequencies, the sizes and shapes of the pillars

  12. Ultrasonic Inspection Of Thick Sections

    Science.gov (United States)

    Friant, C. L.; Djordjevic, B. B.; O'Keefe, C. V.; Ferrell, W.; Klutz, T.

    1993-01-01

    Ultrasonics used to inspect large, relatively thick vessels for hidden defects. Report based on experiments in through-the-thickness transmission of ultrasonic waves in both steel and filament-wound composite cases of solid-fuel rocket motors.

  13. Conductivity Effect on the Capacitance Measurement of a Parallel-Plate Capacitive Sensor System

    Directory of Open Access Journals (Sweden)

    Peyman Azimi

    2011-01-01

    Full Text Available In this article design and operation of a parallel-plate capacitive sensor based on the dielectric capacitance and conductance change of the gap medium is reported. The designed system was used to determine characteristics of different water liquids as a result of the capacitance variations. The air gap capacitance is measured and then by filling the gap with a liquid the capacitance is monitored for different liquids. Proposed sensor is used for the distilled, tap, boiled, and salt water measurements and the capacitance results are compared. A big difference about 45.5 :F in capacitance values for the salt and distilled water shows a high sensitivity, which can be used to recognize different water liquids. The experimental results are promising for water liquids and verify the successful operation of such a device as a liquid sensor, a useful method for checking the electrical quality of the water that is required for different applications.

  14. Ultrasonics in Dentistry

    Science.gov (United States)

    Walmsley, A. D.

    Ultrasonic instruments have been used in dentistry since the 1950's. Initially they were used to cut teeth but very quickly they became established as an ultrasonic scaler which was used to remove deposits from the hard tissues of the tooth. This enabled the soft tissues around the tooth to return to health. The ultrasonic vibrations are generated in a thin metal probe and it is the working tip that is the active component of the instrument. Scanning laser vibrometry has shown that there is much variability in their movement which is related to the shape and cross sectional shape of the probe. The working instrument will also generate cavitation and microstreaming in the associated cooling water. This can be mapped out along the length of the instrument indicating which are the active areas. Ultrasonics has also found use for cleaning often inaccessible or different surfaces including root canal treatment and dental titanium implants. The use of ultrasonics to cut bone during different surgical techniques shows considerable promise. More research is indicated to determine how to maximize the efficiency of such instruments so that they are more clinically effective.

  15. Laser Micromachining and Information Discovery Using a Dual Beam Interferometry

    Energy Technology Data Exchange (ETDEWEB)

    Senthil P. Theppakuttaikomaraswamy

    2001-12-31

    Lasers have proven to be among the most promising tools for micromachining because they can process features down to the size of the laser wavelength (smaller than 1 micrometer) and they provide a non-contact technology for machining. The demand for incorporating in-situ diagnostics technology into the micromachining environment is driven by the increasing need for producing micro-parts of high quality and accuracy. Laser interferometry can be used as an on-line monitoring tool and it is the aim of this work to enhance the understanding and application of Michelson interferometry principle for the in-situ diagnostics of the machining depth on the sub-micron and micron scales. micromachining is done on two different materials and a comprehensive investigation is done to control the width and depth of the machined feature. To control the width of the feature, laser micromachining is done on copper and a detailed analysis is performed. The objective of this experiment is to make a precision mask for sputtering with an array of holes on it using an Nd:YAG laser of 532 nm wavelength. The diameter of the hole is 50 {micro}m and the spacing between holes (the distance between the centers) is 100 {micro}m. Michelson interferometer is integrated with a laser machining system to control the depth of machining. An excimer laser of 308 nm wavelength is used for micromachining. A He-Ne laser of 632.8 nm wavelength is used as the light source for the interferometer. Interference patterns are created due to the change in the path length between the two interferometer arms. The machined depth information is obtained from the interference patterns on an oscilloscope detected by a photodiode. To compare the predicted depth by the interferometer with the true machining depth, a surface profilometer is used to measure the actual machining depth on the silicon. It is observed that the depths of machining obtained by the surface profile measurement are in accordance with the

  16. Micromachined piezoresistive inclinometer with oscillator-based integrated interface circuit and temperature readout

    International Nuclear Information System (INIS)

    In this paper a dual-chip system for inclination measurement is presented. It consists of a MEMS (microelectromechanical system) piezoresistive accelerometer manufactured in silicon bulk micromachining and a CMOS (complementary metal oxide semiconductor) ASIC (application specific integrated circuit) interface designed for resistive-bridge sensors. The sensor is composed of a seismic mass symmetrically suspended by means of four flexure beams that integrate two piezoresistors each to detect the applied static acceleration, which is related to inclination with respect to the gravity vector. The ASIC interface is based on a relaxation oscillator where the frequency and the duty cycle of a rectangular-wave output signal are related to the fractional bridge imbalance and the overall bridge resistance of the sensor, respectively. The latter is a function of temperature; therefore the sensing element itself can be advantageously used to derive information for its own thermal compensation. DC current excitation of the sensor makes the configuration unaffected by wire resistances and parasitic capacitances. Therefore, a modular system results where the sensor can be placed remotely from the electronics without suffering accuracy degradation. The inclination measurement system has been characterized as a function of the applied inclination angle at different temperatures. At room temperature, the experimental sensitivity of the system results in about 148 Hz/g, which corresponds to an angular sensitivity around zero inclination angle of about 2.58 Hz deg−1. This is in agreement with finite element method simulations. The measured output fluctuations at constant temperature determine an equivalent resolution of about 0.1° at midrange. In the temperature range of 25–65 °C the system sensitivity decreases by about 10%, which is less than the variation due to the microsensor alone thanks to thermal compensation provided by the current excitation of the bridge and the

  17. Artificial Intelligence Assists Ultrasonic Inspection

    Science.gov (United States)

    Schaefer, Lloyd A.; Willenberg, James D.

    1992-01-01

    Subtle indications of flaws extracted from ultrasonic waveforms. Ultrasonic-inspection system uses artificial intelligence to help in identification of hidden flaws in electron-beam-welded castings. System involves application of flaw-classification logic to analysis of ultrasonic waveforms.

  18. Ultrasonic tests. Pt. 2

    International Nuclear Information System (INIS)

    After a basic treatment of ultrasonic wave propagation, of the state-of-the-art methods and the technical background in the preceeding part, advanced ultrasonic NDT techniques are presented here. The discussion of new development includes - manipulation systems, - automation of ultrasonic testing methods, documentation and evaluation. In the middle of this part the main problem areas will be discussed: - detection of defects (e.g. in coarse grained structures and welds), - classification of defects (e.g. discrimination between crack-like and volumetric faults), - sizing of defects. Research in the field of acoustical holography, development of probes and phased arrays, electromagnetic acoustic transducers and signal enhancement are the main contributing parts to the report. (orig./RW)

  19. Ultrasonic colour Doppler imaging

    DEFF Research Database (Denmark)

    Evans, David H; Jensen, Jørgen Arendt; Nielsen, Michael Bachmann

    2011-01-01

    Ultrasonic colour Doppler is an imaging technique that combines anatomical information derived using ultrasonic pulse-echo techniques with velocity information derived using ultrasonic Doppler techniques to generate colour-coded maps of tissue velocity superimposed on grey-scale images of tissue...... weaknesses, perhaps the greatest being that in conventional systems, the velocities measured and thus displayed are the components of the flow velocity directly towards or away from the transducer, while ideally the method would give information about the magnitude and direction of the three-dimensional flow...... vectors. This review briefly introduces the principles behind colour Doppler imaging and describes some clinical applications. It then describes the basic components of conventional colour Doppler systems and the methods used to derive velocity information from the ultrasound signal. Next, a number of new...

  20. Pick-and-place process for sensitivity improvement of the capacitive type CMOS MEMS 2-axis tilt sensor

    International Nuclear Information System (INIS)

    This study exploits the foundry available complimentary metal-oxide-semiconductor (CMOS) process and the packaging house available pick-and-place technology to implement a capacitive type micromachined 2-axis tilt sensor. The suspended micro mechanical structures such as the spring, stage and sensing electrodes are fabricated using the CMOS microelectromechanical systems (MEMS) processes. A bulk block is assembled onto the suspended stage by pick-and-place technology to increase the proof-mass of the tilt sensor. The low temperature UV-glue dispensing and curing processes are employed to bond the block onto the stage. Thus, the sensitivity of the CMOS MEMS capacitive type 2-axis tilt sensor is significantly improved. In application, this study successfully demonstrates the bonding of a bulk solder ball of 100 µm in diameter with a 2-axis tilt sensor fabricated using the standard TSMC 0.35 µm 2P4M CMOS process. Measurements show the sensitivities of the 2-axis tilt sensor are increased for 2.06-fold (x-axis) and 1.78-fold (y-axis) after adding the solder ball. Note that the sensitivity can be further improved by reducing the parasitic capacitance and the mismatch of sensing electrodes caused by the solder ball. (paper)

  1. Ultrasonic Processing of Materials

    Energy Technology Data Exchange (ETDEWEB)

    Meek, Thomas T.; Han, Qingyou; Jian, Xiaogang; Xu, Hanbing

    2005-06-30

    The purpose of this project was to determine the impact of a new breakthrough technology, ultrasonic processing, on various industries, including steel, aluminum, metal casting, and forging. The specific goals of the project were to evaluate core principles and establish quantitative bases for the ultrasonc processing of materials, and to demonstrate key applications in the areas of grain refinement of alloys during solidification and degassing of alloy melts. This study focussed on two classes of materials - aluminum alloys and steels - and demonstrated the application of ultrasonic processing during ingot casting.

  2. Aligned carbon nanotube based ultrasonic microtransducers for durability monitoring in civil engineering

    OpenAIRE

    LEBENTAL, Bérengère; Chainais, Pierre; CHENEVIER, Pascale; Chevalier, Nicolas; Delevoye, Eric; Fabbri, Jean-Marc; Nicoletti, Sergio; Renaux, Philippe; Ghis, Anne

    2011-01-01

    International audience Structural health monitoring of porous materials such as concrete is becoming a major component in our resource-limited economy, as it conditions durable exploitation of existing facilities. Durability in porous materials depends on nanoscale features which need to be monitored in situ with nanometric resolution. To address this problem, we put forward an approach based on the development of a new nanosensor, namely a capacitive micrometric ultrasonic transducer whos...

  3. Real-time control of ultrafast laser micromachining by laser-induced breakdown spectroscopy

    International Nuclear Information System (INIS)

    Ultrafast laser micromachining provides many advantages for precision micromachining. One challenging problem, however, particularly for multilayer and heterogeneous materials, is how to prevent a given material from being ablated, as ultrafast laser micromachining is generally material insensitive. We present a real-time feedback control system for an ultrafast laser micromachining system based on laser-induced breakdown spectroscopy (LIBS). The characteristics of ultrafast LIBS are reviewed and discussed so as to demonstrate the feasibility of the technique. Comparison methods to identify the material emission patterns are developed, and several of the resulting algorithms were implemented into a real-time computer control system. LIBS-controlled micromachining is demonstrated for the fabrication of microheater structures on thermal sprayed materials. Compared with a strictly passive machining process without any such feedback control, the LIBS-based system provides several advantages including less damage to the substrate layer, reduced machining time, and more-uniform machining features

  4. Real-time control of ultrafast laser micromachining by laser-induced breakdown spectroscopy.

    Science.gov (United States)

    Tong, Tao; Li, Jinggao; Longtin, Jon P

    2004-03-20

    Ultrafast laser micromachining provides many advantages for precision micromachining. One challenging problem, however, particularly for multilayer and heterogeneous materials, is how to prevent a given material from being ablated, as ultrafast laser micromachining is generally material insensitive. We present a real-time feedback control system for an ultrafast laser micromachining system based on laser-induced breakdown spectroscopy (LIBS). The characteristics of ultrafast LIBS are reviewed and discussed so as to demonstrate the feasibility of the technique. Comparison methods to identify the material emission patterns are developed, and several of the resulting algorithms were implemented into a real-time computer control system. LIBS-controlled micromachining is demonstrated for the fabrication of microheater structures on thermal sprayed materials. Compared with a strictly passive machining process without any such feedback control, the LIBS-based system provides several advantages including less damage to the substrate layer, reduced machining time, and more-uniform machining features. PMID:15065729

  5. Fabrication and characterization of annular-array, high-frequency, ultrasonic transducers based on PZT thick film

    OpenAIRE

    Wang, D; Filoux, E; Levassort, F; Lethiecq, M.; Rocks, SA; Dorey, RA

    2014-01-01

    In this work, low temperature deposition of ceramics, in combination with micromachining techniques have been used to fabricate a kerfed, annular-array, high-frequency, micro ultrasonic transducer (with seven elements). This transducer was based on PZT thick film and operated in thickness mode. The 27 μm thick PZT film was fabricated using a low temperature (720 °C) composite sol-gel ceramic (sol + ceramic powder) deposition technique. Chemical wet etching was used to pattern the PZT thick fi...

  6. Experiments with Ultrasonic Transducers.

    Science.gov (United States)

    Greenslade, Thomas R., Jr.

    1994-01-01

    Discusses the use of 40 kHz ultrasonic transducers to study wave phenomena. Determines that the resulting wavelength of 9 mm allows acoustic experiments to be performed on a tabletop. Includes transducer characteristics and activities on speed of sound, reflection, double- and single-slit diffraction, standing waves, acoustical zone plate, and…

  7. Ultrasonic Drilling and Coring

    Science.gov (United States)

    Bar-Cohen, Yoseph

    1998-01-01

    A novel drilling and coring device, driven by a combination, of sonic and ultrasonic vibration, was developed. The device is applicable to soft and hard objects using low axial load and potentially operational under extreme conditions. The device has numerous potential planetary applications. Significant potential for commercialization in construction, demining, drilling and medical technologies.

  8. Femtosecond micromachining in transparent bulk materials using an anamorphic lens.

    Science.gov (United States)

    Desautels, G Logan; Brewer, Chris D; Walker, Mark A; Juhl, Shane B; Finet, Marc A; Powers, Peter E

    2007-10-01

    A unique anamorphic lens design was applied to a circular 780nm femtosecond laser pulse to transform it into an elliptically shaped beam at focus. This lens was developed to give an alternative method of micromachining bulk transparent materials. The challenge for femtosecond laser processing is to control the nonlinear affect of self-focusing, which can occur when using a fast f-number lens. Once the focused spot is dominated by self-focusing the predicted focused beam becomes a filament inside the bulk, which is an undesirable effect. The anamorphic lens resolves this self-focusing by increasing the numerical aperture (NA) and employing an elliptical beam shape. The anamorphic lens was designed to furnish a 2.5mum by 190mum line at focus. Provided the pulse energy is high enough, transparent bulk material will be damaged with a single femtosecond laser pulse. Damage in this text refers to visual change in the index of refraction as observed under an optical microscope. Using this elliptical shape (or line), grating structures were micro-machined on the surface of SiC bulk transparent substrate. SiC was chosen because it is known for its micromachining difficulty and its crystalline structure. From the lack of self-focusing and using energy that is just above the damage threshold the focused line beam generated from the anamorphic lens grating structures produced a line shape nearly identical to the geometrical approximation. In this paper we discuss a new method of writing gratings (or other types of structures) in bulk transparent materials using a single femtosecond laser pulse. We will investigate the grating structures visually (inspected under an optical microscope) and also by use of an atomic force microscopy (AFM). In addition, we test the grating diffraction efficiency (DE) as a function of grating spacing, d. PMID:19550582

  9. Capacitive Cells for Dielectric Constant Measurement

    Science.gov (United States)

    Aguilar, Horacio Munguía; Maldonado, Rigoberto Franco

    2015-01-01

    A simple capacitive cell for dielectric constant measurement in liquids is presented. As an illustrative application, the cell is used for measuring the degradation of overheated edible oil through the evaluation of their dielectric constant.

  10. Complementary surface charge for enhanced capacitive deionization

    NARCIS (Netherlands)

    Gao, X.; Porada, S.; Omosebi, A.; Liu, K.L.; Biesheuvel, P.M.; Landon, J.

    2016-01-01

    Commercially available activated carbon cloth electrodes are treated using nitric acid and ethylenediamine solutions, resulting in chemical surface charge enhanced carbon electrodes for capacitive deionization (CDI) applications. Surface charge enhanced electrodes are then configured in a CDI cel

  11. A Broadband Micro-machined Far-Infrared Absorber

    CERN Document Server

    Wollack, Edward J; Jhabvala, Christine A; Miller, Kevin H; Quijada, Manuel A

    2016-01-01

    The experimental investigation of a broadband far-infrared meta-material absorber is described. The observed absorptance is $>\\,0.95$ from ${\\rm 1-20\\,THz}$ (${\\rm 300-15\\,\\mu m}$) over a temperature range spanning ${\\rm 5-300\\,K}$. The meta-material, realized from an array of tapers ${\\rm \\approx 100\\,\\mu m}$ in length, is largely insensitive to the detailed geometry of these elements and is cryogenically compatible with silicon-based micro-machined technologies. The electromagnetic response is in general agreement with a physically motivated transmission line model.

  12. Sub-band-gap laser micromachining of lithium niobate

    DEFF Research Database (Denmark)

    Christensen, F. K.; Müllenborn, Matthias

    1995-01-01

    Laser processing of insulators and semiconductors is usually realized using photon energies exceeding the band-gap energy. This makes laser processing of insulators difficult since high photon energies typically require either a pulsed laser or a frequency-doubled continuous-wave laser. A new...... method is reported which enables us to do laser processing of lithium niobate using sub-band-gap photons. Using high scan speeds, moderate power densities, and sub-band-gap photon energies results in volume removal rates in excess of 106µm3/s. This enables fast micromachining of small piezoelectric...

  13. A broadband micro-machined far-infrared absorber

    Science.gov (United States)

    Wollack, E. J.; Datesman, A. M.; Jhabvala, C. A.; Miller, K. H.; Quijada, M. A.

    2016-05-01

    The experimental investigation of a broadband far-infrared meta-material absorber is described. The observed absorptance is >0.95 from 1 to 20 THz (300-15 μm) over a temperature range spanning 5-300 K. The meta-material, realized from an array of tapers ≈100 μm in length, is largely insensitive to the detailed geometry of these elements and is cryogenically compatible with silicon-based micro-machined technologies. The electromagnetic response is in general agreement with a physically motivated transmission line model.

  14. Proton beam micromachining on PMMA, Foturan and CR-39 materials

    CERN Document Server

    Rajta, I; Kiss, A Z; Gomez-Morilla, I; Abraham, M H

    2003-01-01

    Proton Beam Micromachining was demonstrated at the Institute of Nuclear Research of the Hungarian Academy of Sciences using three different types of resists: PMMA, Foturan and CR-39 type Solid State Nuclear Track Detector material. Irradiations have been performed on the nuclear microprobe facility at ATOMKI. The beam scanning was done using a National Instruments (NI) card (model 6711), and the new C++ version of the program IonScan, developed specifically for PBM applications called IonScan 2.0. (R.P.)

  15. Proton beam micromachining on PMMA, Foturan and CR-39 materials

    International Nuclear Information System (INIS)

    Proton Beam Micromachining was demonstrated at the Institute of Nuclear Research of the Hungarian Academy of Sciences using three different types of resists: PMMA, Foturan and CR-39 type Solid State Nuclear Track Detector material. Irradiations have been performed on the nuclear microprobe facility at ATOMKI. The beam scanning was done using a National Instruments (NI) card (model 6711), and the new C++ version of the program IonScan, developed specifically for PBM applications called IonScan 2.0. (R.P.)

  16. Micromachined silicon acoustic delay lines for ultrasound applications

    International Nuclear Information System (INIS)

    In this paper, we present the design, fabrication and testing of novel micromachined silicon-based acoustic delay lines. The acoustic properties of different silicon delay-line structures have been characterized. Based on the experiment results, two different acoustic delay line systems (parallel and serial) have been successfully demonstrated to create controlled time delays in multiple channels of ultrasound signals. The time-delayed ultrasound signals are received with a single-element ultrasound transducer in a time-serial manner. This unique capability could be used to merge multiple signal channels, thereby enabling new ultrasound receiver designs with potentially less complexity and lower cost. (paper)

  17. Electrochemical mechanical micromachining based on confined etchant layer technique.

    Science.gov (United States)

    Yuan, Ye; Han, Lianhuan; Zhang, Jie; Jia, Jingchun; Zhao, Xuesen; Cao, Yongzhi; Hu, Zhenjiang; Yan, Yongda; Dong, Shen; Tian, Zhong-Qun; Tian, Zhao-Wu; Zhan, Dongping

    2013-01-01

    The confined etchant layertechnique (CELT) has been proved an effective electrochemical microfabrication method since its first publication at Faraday Discussions in 1992. Recently, we have developed CELT as an electrochemical mechanical micromachining (ECMM) method by replacing the cutting tool used in conventional mechanical machining with an electrode, which can perform lathing, planing and polishing. Through the coupling between the electrochemically induced chemical etching processes and mechanical motion, ECMM can also obtain a regular surface in one step. Taking advantage of CELT, machining tolerance and surface roughness can reach micro- or nano-meter scale. PMID:24466665

  18. Synchrotron radiation direct photoetching of polymers and crystals for micromachining

    International Nuclear Information System (INIS)

    Synchrotron radiation etching of polymers and optical crystals which are transparent throughout the spectral range from visible to ultraviolet has been carried out without using any chemicals, successfully creating high-aspect-ratio microstructures for micromachining. A detailed study of the etching rates by varying the synchrotron beam current, sample temperature, beam size and aspect ratio showed that this synchrotron radiation process is essentially different from laser ablation, while an in situ mass spectrometric analysis of gaseous etching products showed that the dissociation mechanism involved with the synchrotron radiation processing, even with heating, is completely different from the thermal dissociation of the laser ablation

  19. DNA transport by a micromachined Brownian ratchet device

    CERN Document Server

    Bader, J S; Henck, S A; Deem, M W; McDermott, G A; Bustillo, J M; Simpson, J W; Mulhern, G T; Rothberg, J M; Bader, Joel S; Hammond, Richard W.; Henck, Steven A.; Deem, Michael W.; Dermott, Gregory A. Mc; Bustillo, James M.; Simpson, John W.; Mulhern, Gregory T.; Rothberg, Jonathan M.

    1999-01-01

    We have micromachined a silicon-chip device that transports DNA with aBrownian ratchet that rectifies the Brownian motion of microscopic particles.Transport properties for a DNA 50mer agree with theoretical predictions, andthe DNA diffusion constant agrees with previous experiments. This type ofmicromachine could provide a generic pump or separation component for DNA orother charged species as part of a microscale lab-on-a-chip. A device withreduced feature size could produce a size-based separation of DNA molecules,with applications including the detection of single nucleotide polymorphisms.

  20. A novel electrostatic-driven tuning fork micromachined gyroscope with a bar structure operating at atmospheric pressure

    International Nuclear Information System (INIS)

    A novel electrostatic-driven tuning fork micromachined gyroscope with a bar structure is presented. The gyroscope is fabricated by silicon–glass bonding and deep reactive ion etching (DRIE) technology. The gyroscope's driving and sensing proof masses consist of many movable bars. As the motion of the movable proof masses is parallel to the plane of fixed driving and sensing electrodes on a glass substrate, there is mainly slide film damping in the driving and sensing directions, which enables it to achieve high-quality factors and vacuum-free packaging. The gyroscope can operate at atmospheric pressure by electrostatic driving and capacitive sensing. The performances of the gyroscope are tested and the results show that the resonant frequencies and the quality factors for driving and sensing modes are 2.873 kHz and 2.989 kHz, 804 and 789 at atmospheric pressure, respectively. The scale factor and nonlinearity of the gyroscope are 17.45 mV/°/s and 0.43%, respectively

  1. Experimental determination of dielectric barrier discharge capacitance.

    Science.gov (United States)

    Pipa, A V; Hoder, T; Koskulics, J; Schmidt, M; Brandenburg, R

    2012-07-01

    The determination of electrical parameters (such as instantaneous power, transferred charge, and gas gap voltage) in dielectric barrier discharge (DBD) reactors relies on estimates of key capacitance values. In the classic large-scale sinusoidal-voltage driven DBD, also known as silent or ozonizer discharge, capacitance values can be determined from charge-voltage (Q-V) plot, also called Lissajous figure. For miniature laboratory reactors driven by fast pulsed voltage waveforms with sub-microsecond rise time, the capacitance of the dielectric barriers cannot be evaluated from a single Q-V plot because of the limited applicability of the classical theory. Theoretical determination can be problematic due to electrode edge effects, especially in the case of asymmetrical electrodes. The lack of reliable capacitance estimates leads to a "capacitance bottleneck" that obstructs the determination of other DBD electrical parameters in fast-pulsed reactors. It is suggested to obtain capacitance of dielectric barriers from a plot of the maximal charge versus maximal voltage amplitude (Q(max) - V(max) plot) in a manner analogous to the classical approach. The method is examined using measurements of current and voltage waveforms of a coaxial DBD reactor in argon at 100 mbar driven by square voltage pulses with a rise time of 20 ns and with different voltage amplitudes up to 10 kV. Additionally, the applicability of the method has been shown for the data reported in literature measured at 1 bar of nitrogen-oxygen gas mixtures and xenon. PMID:22852728

  2. Capacitance of Graphene Bilayer as a Which-Layer Probe

    OpenAIRE

    Young, Andrea F.; Levitov, Leonid S.

    2011-01-01

    The unique capabilities of capacitance measurements in bilayer graphene enable probing of layer-specific properties that are normally out of reach in transport measurements. Furthermore, capacitance measurements in the top-gate and penetration field geometries are sensitive to different physical quantities: the penetration field capacitance probes the two layers equally, whereas the top gate capacitance preferentially samples the near layer, resulting in the "near-layer capacitance enhancemen...

  3. Nanoscale capacitance: A classical charge-dipole approximation

    OpenAIRE

    Jun-Qiang Lu; Jonathan Gonzalez; Carlos Sierra; Yang Li

    2013-01-01

    Modeling nanoscale capacitance presents particular challenge because of dynamic contribution from electrodes, which can usually be neglected in modeling macroscopic capacitance and nanoscale conductance. We present a model to calculate capacitances of nano-gap configurations and define effective capacitances of nanoscale structures. The model is implemented by using a classical atomic charge-dipole approximation and applied to calculate capacitance of a carbon nanotube nano-gap and effective ...

  4. Hybrid micromachining using a nanosecond pulsed laser and micro EDM

    International Nuclear Information System (INIS)

    Micro electrical discharge machining (micro EDM) is a well-known precise machining process that achieves micro structures of excellent quality for any conductive material. However, the slow machining speed and high tool wear are main drawbacks of this process. Though the use of deionized water instead of kerosene as a dielectric fluid can reduce the tool wear and increase the machine speed, the material removal rate (MRR) is still low. In contrast, laser ablation using a nanosecond pulsed laser is a fast and non-wear machining process but achieves micro figures of rather low quality. Therefore, the integration of these two processes can overcome the respective disadvantages. This paper reports a hybrid process of a nanosecond pulsed laser and micro EDM for micromachining. A novel hybrid micromachining system that combines the two discrete machining processes is introduced. Then, the feasibility and characteristics of the hybrid machining process are investigated compared to conventional EDM and laser ablation. It is verified experimentally that the machining time can be effectively reduced in both EDM drilling and milling by rapid laser pre-machining prior to micro EDM. Finally, some examples of complicated 3D micro structures fabricated by the hybrid process are shown

  5. Eye Vision Testing System and Eyewear Using Micromachines

    Directory of Open Access Journals (Sweden)

    Nabeel A. Riza

    2015-11-01

    Full Text Available Proposed is a novel eye vision testing system based on micromachines that uses micro-optic, micromechanic, and microelectronic technologies. The micromachines include a programmable micro-optic lens and aperture control devices, pico-projectors, Radio Frequency (RF, optical wireless communication and control links, and energy harvesting and storage devices with remote wireless energy transfer capabilities. The portable lightweight system can measure eye refractive powers, optimize light conditions for the eye under testing, conduct color-blindness tests, and implement eye strain relief and eye muscle exercises via time sequenced imaging. A basic eye vision test system is built in the laboratory for near-sighted (myopic vision spherical lens refractive error correction. Refractive error corrections from zero up to −5.0 Diopters and −2.0 Diopters are experimentally demonstrated using the Electronic-Lens (E-Lens and aperture control methods, respectively. The proposed portable eye vision test system is suited for children’s eye tests and developing world eye centers where technical expertise may be limited. Design of a novel low-cost human vision corrective eyewear is also presented based on the proposed aperture control concept. Given its simplistic and economical design, significant impact can be created for humans with vision problems in the under-developed world.

  6. Direct writing of microtunnels using proton beam micromachining

    International Nuclear Information System (INIS)

    The production of high aspect ratio microstructures is a potential growth area. The combination of deep X-ray lithography with electroforming and micromolding (i.e. LIGA) is one of the main techniques used to produce 3D microstructures. The new technique of proton micromachining employs focused MeV protons in a direct write process which is complementary to LIGA. During ion exposure of positive photoresist like PMMA, scission of molecular chains occurs. These degraded polymer chains are removed by the developer. The aim of this paper is to investigate the capabilities of proton micromachining as a lithographic technique. We show the realization of sub-surface channels, or microtunnels, which have been fabricated in only one exposure and without cutting or resurfacing the material. Using our Van-de-Graaff accelerator, the resist (PMMA) has been exposed with high-energy protons (2.5 MeV). The range of charged particles in matter is well-defined and depends on the energy. Therefore, it is possible to obtain a dose which is sufficient to develop the bottom part of the ion paths but not the top part. Thus, by selecting the energy and the exposure time, a big variety of microtunnels can be realized

  7. Direct writing of microtunnels using proton beam micromachining

    Energy Technology Data Exchange (ETDEWEB)

    Marot, Laurent [CAFI, Ion Beam Analysis Center, Route Jambe Ducommun 8a, CH-2400 Le Locle (Switzerland)]. E-mail: laurent.marot@he-arc.ch; Munnik, Frans [CAFI, Ion Beam Analysis Center, Route Jambe Ducommun 8a, CH-2400 Le Locle (Switzerland); Mikhailov, Serguei [CAFI, Ion Beam Analysis Center, Route Jambe Ducommun 8a, CH-2400 Le Locle (Switzerland)

    2006-08-15

    The production of high aspect ratio microstructures is a potential growth area. The combination of deep X-ray lithography with electroforming and micromolding (i.e. LIGA) is one of the main techniques used to produce 3D microstructures. The new technique of proton micromachining employs focused MeV protons in a direct write process which is complementary to LIGA. During ion exposure of positive photoresist like PMMA, scission of molecular chains occurs. These degraded polymer chains are removed by the developer. The aim of this paper is to investigate the capabilities of proton micromachining as a lithographic technique. We show the realization of sub-surface channels, or microtunnels, which have been fabricated in only one exposure and without cutting or resurfacing the material. Using our Van-de-Graaff accelerator, the resist (PMMA) has been exposed with high-energy protons (2.5 MeV). The range of charged particles in matter is well-defined and depends on the energy. Therefore, it is possible to obtain a dose which is sufficient to develop the bottom part of the ion paths but not the top part. Thus, by selecting the energy and the exposure time, a big variety of microtunnels can be realized.

  8. Water-soluble sacrificial layers for surface micromachining.

    Science.gov (United States)

    Linder, Vincent; Gates, Byron D; Ryan, Declan; Parviz, Babak A; Whitesides, George M

    2005-07-01

    This manuscript describes the use of water-soluble polymers for use as sacrificial layers in surface micromachining. Water-soluble polymers have two attractive characteristics for this application: 1) They can be deposited conveniently by spin-coating, and the solvent removed at a low temperature (95-150 degrees C), and 2) the resulting layer can be dissolved in water; no corrosive reagents or organic solvents are required. This technique is therefore compatible with a number of fragile materials, such as organic polymers, metal oxides and metals-materials that might be damaged during typical surface micromachining processes. The carboxylic acid groups of one polymer-poly(acrylic acid) (PAA)-can be transformed by reversible ion-exchange from water-soluble (Na+ counterion) to water-insoluble (Ca2+ counterion) forms. The use of PAA and dextran polymers as sacrificial materials is a useful technique for the fabrication of microstructures: Examples include metallic structures formed by the electrodeposition of nickel, and freestanding, polymeric structures formed by photolithography. PMID:17193516

  9. Laser micromachining of biofactory-on-a-chip devices

    Science.gov (United States)

    Burt, Julian P.; Goater, Andrew D.; Hayden, Christopher J.; Tame, John A.

    2002-06-01

    Excimer laser micromachining provides a flexible means for the manufacture and rapid prototyping of miniaturized systems such as Biofactory-on-a-Chip devices. Biofactories are miniaturized diagnostic devices capable of characterizing, manipulating, separating and sorting suspension of particles such as biological cells. Such systems operate by exploiting the electrical properties of microparticles and controlling particle movement in AC non- uniform stationary and moving electric fields. Applications of Biofactory devices are diverse and include, among others, the healthcare, pharmaceutical, chemical processing, environmental monitoring and food diagnostic markets. To achieve such characterization and separation, Biofactory devices employ laboratory-on-a-chip type components such as complex multilayer microelectrode arrays, microfluidic channels, manifold systems and on-chip detection systems. Here we discuss the manufacturing requirements of Biofactory devices and describe the use of different excimer laser micromachined methods both in stand-alone processes and also in conjunction with conventional fabrication processes such as photolithography and thermal molding. Particular attention is given to the production of large area multilayer microelectrode arrays and the manufacture of complex cross-section microfluidic channel systems for use in simple distribution and device interfacing.

  10. Microscopic View of Soil on a Micromachined Silicone Substrate

    Science.gov (United States)

    2008-01-01

    This image taken by the Optical Microscope on NASA's Phoenix Mars Lander on Sol 17 (June 11, 2008) shows soil sprinkled from the lander's Robot Arm scoop onto a substrate that has been micromachined to produce different patterns of pegs and holes to capture the smallest particles in the Martian soil. The micromachined substrates are designed to tightly hold particles for imaging using the Atomic Force Microscope on Phoenix, which should be able to zoom in another 40 times beyond the magnification in this Optical Microscope image. Each stripe has a different spacing of pegs and holes. The strip third from the left, with a peg spacing of 5 micrometers, has been most successful in collecting the particles. These substrates were fabricated by Imperial College London as the United Kingdom hardware contribution to the Phoenix mission. For scale, each strip is 0.4 millimeter (0.016 inch) wide. The Phoenix Mission is led by the University of Arizona, Tucson, on behalf of NASA. Project management of the mission is by NASA's Jet Propulsion Laboratory, Pasadena, Calif. Spacecraft development is by Lockheed Martin Space Systems, Denver.

  11. Comparing flat top and Gaussian focal beam shapes when micromachining steel

    Science.gov (United States)

    Lizotte, Todd E.; Ohar, Orest

    2011-10-01

    Laser micromachining, drilling and marking is extensively used within the aerospace, automotive and firearms industries. The unique properties of lasers make them ideal tools for micromachining a wide diversity of materials, including steel alloys [1]. We describe the results of micromachining of low carbon steel and stainless steel alloys, using a high powered diode pumped solid state (DPSS) laser operating at a wavelength of 355nm. The laser was configured with beam conditioning optics to produce either a flat top beam or a Gaussian output which was then sent through a galvanometer scanner and telecentric lens beam delivery system. This paper outlines the interrelationship of process variables when micromachining fine features in steel and stainless steel alloys. Process variables measured included the optimum laser focus plane, energy density, galvanometer scan rate, and pulse overlap and focal spot diameter. Optimum process performance was evaluated based on a dimensional comparison of the micromachined features from each test coupon, including uniformity and surface roughness of the micromachined surface and the minimization of surface irregularities (stalagmite type slag / debris / corn row patterns) and taper angle of the micromachined feature side walls.

  12. Demonstration of robust micromachined jet technology and its application to realistic flow control problems

    International Nuclear Information System (INIS)

    This paper describes the demonstration of successful fabrication and initial characterization of micromachined pressure sensors and micromachined jets (microjets) fabricated for use in macro flow control and other applications. In this work, the microfabrication technology was investigated to create a micromachined fluidic control system with a goal of application in practical fluids problems, such as UAV (Unmanned Aerial Vehicle)-scale aerodynamic control. Approaches of this work include : (1) the development of suitable micromachined synthetic jets (microjets) as actuators, which obviate the need to physically extend micromachined structures into an external flow ; and (2) a non-silicon alternative micromachining fabrication technology based on metallic substrates and lamination (in addition to traditional MEMS technologies) which will allow the realization of larger scale, more robust structures and larger array active areas for fluidic systems. As an initial study, an array of MEMS pressure sensors and an array of MEMS modulators for orifice-based control of microjets have been fabricated, and characterized. Both pressure sensors and modulators have been built using stainless steel as a substrate and a combination of lamination and traditional micromachining processes as fabrication technologies

  13. Cheese maturity assessment using ultrasonics.

    Science.gov (United States)

    Benedito, J; Carcel, J; Clemente, G; Mulet, A

    2000-02-01

    The relationship between Mahon cheese maturity and ultrasonic velocity was examined. Moisture and textural properties were used as maturity indicators. The ultrasonic velocity of the cheese varied between 1630 and 1740 m/s, increasing with the curing time mainly because of loss of water, which also produced an increase of the textural properties. Because of the nature of low-intensity ultrasonics, velocity was better related to those textural parameters that involved small displacements. Ultrasonic velocity decreased with increasing temperature because of the negative temperature coefficient of the ultrasonic velocity of fat and the melting of fat. These results highlight the potential use of ultrasonic velocity measurements to rapidly and nondestructively assess cheese maturity. PMID:10714857

  14. Ultrasonic thermometer isolation standoffs

    International Nuclear Information System (INIS)

    A method is provided for minimizing sticking of the transmission line to the protective sheath and preventing noise echoes from interfering with signal echoes in an improved high temperature ultrasonic thermometer which includes an ultrasonic transmission line surrounded by a protective sheath. Small isolation standoffs are mounted on the transmission line to minimize points of contact between the transmission line and the protective sheath, the isolation standoffs serving as discontinuities mounted on the transmission line at locations where a signal echo is desired or where an echo can be tolerated. Consequently any noise echo generated by the sticking of the standoff to the protective sheath only adds to the amplitude of the echo generated at the standoff and does not interfere with the other signal echoes. 6 claims, 3 figures

  15. Ultrasonic tests. Pt. 1

    International Nuclear Information System (INIS)

    Nondestructive testing (NDT) plays an important part in the field of nuclear power plants operation. The report is concentrated to the primary loop components' ultrasonic NDT. It includes inspection techniques used during fabrication and in service. While a second part is dealing with advanced NDT methods, this first presentation introduces into the variety of ultrasonic testing procedures. After a treatment of the physical background the appropriate choice of equipment and techniques in respect of material, geometry and accessibility will be discussed. The state-of-the-art for detection, location, normalization, classification and sizing of defects will be presented. Finally, evaluation of faults and accept/reject criteria (e.g. based on fracture mechanics) together with the qualification of NDE personnel are concluding the contribution. (orig./RW)

  16. Ultrasonic nondestructive tubing inspection system

    International Nuclear Information System (INIS)

    A system for measuring the extent of tube wall erosion in an inspection region of a heat exchanger tube of a nuclear steam generator, uses an ultrasonic means driven helically inside the eroded tube which may be filled with a fluid (e.g., water) to minimize ultrasonic wave attenuation. A control means cooperates with the ultrasonic means to produce a map of the tube wall thickness in an inspection region

  17. [Development of ultrasonic power meter].

    Science.gov (United States)

    Huang, Hongxin; Hu, Changming; Zheng, Yan; Xu, Honglei; Zhou, Wohua; Wu, Ziwen; Yu, Liudan; Hao, Jiandong; Luo, Yifan

    2014-07-01

    This article describes the design and development of an ultrasonic power meter which is consist of an electronic balance, a practice target, an acoustic enclosures and a blocking. The electronic balance mounted on the blocking is linked with the practice target by connecting rod. By adjusting the blocking makes the practice target suspended above ultrasound probe, and then the ultrasonic power can be measured. After initial tests, the ultrasonic power meter performanced with good stability and high precision. PMID:25330604

  18. Pulsed ultrasonic stir welding system

    Science.gov (United States)

    Ding, R. Jeffrey (Inventor)

    2013-01-01

    An ultrasonic stir welding system includes a welding head assembly having a plate and a rod passing through the plate. The rod is rotatable about a longitudinal axis thereof. During a welding operation, ultrasonic pulses are applied to the rod as it rotates about its longitudinal axis. The ultrasonic pulses are applied in such a way that they propagate parallel to the longitudinal axis of the rod.

  19. Intravascular Ultrasonic Imaging

    OpenAIRE

    Tobis, JM; Mahon, D.; Moriuchi, M; Mallery, JA; Lehmann, K; Griffith, J.; Gessert, J; Zalesky, P; McRae, M; Dwyer, ML; Henry, WL

    1990-01-01

    Because conventional imaging methods are inadequate for evaluating human coronary arteries in vivo, an intravascular ultrasonic imaging catheter was developed that allows the arterial wall to be studied in cross-section from within the artery. The catheter incorporates a mechanically rotating 20-MHz transducer, which is designed so that the ringdown occurs within the catheter and imaging is permitted up to the catheter's surface. The device rotates at 1800-rpm within a plastic sleeve and prov...

  20. Ultrasonic techniques for process monitoring and control.

    Energy Technology Data Exchange (ETDEWEB)

    Chien, H.-T.

    1999-03-24

    Ultrasonic techniques have been applied successfully to process monitoring and control for many industries, such as energy, medical, textile, oil, and material. It helps those industries in quality control, energy efficiency improving, waste reducing, and cost saving. This paper presents four ultrasonic systems, ultrasonic viscometer, on-loom, real-time ultrasonic imaging system, ultrasonic leak detection system, and ultrasonic solid concentration monitoring system, developed at Argonne National Laboratory in the past five years for various applications.

  1. Carbon flow electrodes for continuous operation of capacitive deionization and capacitive mixing energy generation

    NARCIS (Netherlands)

    Porada, S.; Hamelers, H.V.M.; Bryjak, M.; Presser, V.; Biesheuvel, P.M.; Weingarth, D.

    2014-01-01

    Capacitive technologies, such as capacitive deionization and energy harvesting based on mixing energy (“capmix” and “CO2 energy”), are characterized by intermittent operation: phases of ion electrosorption from the water are followed by system regeneration. From a system application point of view, c

  2. Ultrasonic Cutting of Foods

    Science.gov (United States)

    Schneider, Yvonne; Zahn, Susann; Rohm, Harald

    In the field of food engineering, cutting is usually classified as a mechanical unit operation dealing with size reduction by applying external forces on a bulk product. Ultrasonic cutting is realized by superpositioning the macroscopic feed motion of the cutting device or of the product with a microscopic vibration of the cutting tool. The excited tool interacts with the product and generates a number of effects. Primary energy concentration in the separation zone and the modification of contact friction along the tool flanks arise from the cyclic loading and are responsible for benefits such as reduced cutting force, smooth cut surface, and reduced product deformation. Secondary effects such as absorption and cavitation originate from the propagation of the sound field in the product and are closely related to chemical and physical properties of the material to be cut. This chapter analyzes interactions between food products and ultrasonic cutting tools and relates these interactions with physical and chemical product properties as well as with processing parameters like cutting velocity, ultrasonic amplitude and frequency, and tool design.

  3. Sharpening of ultrasonic scalers.

    Science.gov (United States)

    Checchi, L; Pelliccioni, G A; D'Achille, C

    1991-08-01

    Instruments suitable for removing calculus, plaque and necrotic cementum, which hinder normal periodontal reattachment, are extremely important for successful therapy. The test was carried out in order to see if a standard scaler used for ultrasonic tartar removal maintains its physical features when sharpened. 6 scalers, compatible with piezo-electric generators, were tested and 2 diameters, A and B, weights and resonance frequencies were measured. Scalers no. 2, 3, 4, 5, were sharpened and was used as control. All measurements were taken again at the end of the test. Statistical analysis reveals significant variations, after sharpening, of A diameter (t = 4.14 greater than 3.55, p less than 0.01), B diameter (t = 5.34 greater than 3.355, p less than 0.01) and resonance frequency (t = 2.82 greater than 2.306, p less than 0.05); in contrast, there is no significant change of weights (t = 1.17 less than 2.306, p greater than 0.05). These results suggest that sharpening slightly modifies the physical features of ultrasonic tips, so that sharpening ultrasonic scalers, from a physical point of view, can be carried out, paying attention not to damage the water cooling system. PMID:1894743

  4. Ultrasonic investigations in intermetallics

    Indian Academy of Sciences (India)

    Devraj Singh; D K Pandey

    2009-02-01

    Ultrasonic attenuation for the longitudinal and shear waves due to phonon–phonon interaction and thermoelastic mechanism have been evaluated in B2 structured in-termetallic compounds AgMg, CuZr, AuMg, AuTi, AuMn, AuZn and AuCd along $\\langle 1 0 0 \\rangle, \\langle 1 1 1 \\rangle and \\langle 1 1 0 \\rangle crystallographic directions at room temperature. For the same evaluations, second- and third-order elastic constants, ultrasonic velocities, Grüneisen parameters, non-linearity parameter, Debye temperature and thermal relaxation time are also computed. Although the molecular weight of these materials increases from AgMg to AuCd, the obtained results are affected with the deviation number. Attenuation of ultrasonic waves due to phonon–phonon interaction is predominant over thermoelastic loss. Results are compared with available theoretical and experimental results. The results with other well-known physical properties are useful for industrial purposes.

  5. Ion channels, phosphorylation and mammalian sperm capacitation

    Institute of Scientific and Technical Information of China (English)

    Pablo E Visconti; Dario Krapf; José Luis de la Vega-Beltrán; Juan José Acevedo; Alberto Darszon

    2011-01-01

    Sexually reproducing animals require an orchestrated communication between spermatozoa and the egg to generate a new individual. Capacitation, a maturational complex phenomenon that occurs in the female reproductive tract, renders spermatozoa capable of binding and fusing with the oocyte, and it is a requirement for mammalian fertilization. Capacitation encompasses plasma membrane reorganization, ion permeability regulation, cholesterol loss and changes in the phosphorylation state of many proteins. Novel tools to study sperm ion channels, image intracellular ionic changes and proteins with better spatial and temporal resolution, are unraveling how modifications in sperm ion transport and phosphorylation states lead to capacitation. Recent evidence indicates that two parallel pathways regulate phosphorylation events leading to capacitation, one of them requiring activation of protein kinase A and the second one involving inactivation of ser/thr phosphatases. This review examines the involvement of ion transporters and phosphorylation signaling processes needed for spermatozoa to achieve capacitation. Understanding the molecular mechanisms leading to fertilization is central for societies to deal with rising male infertility rates, to develop safe male gamete-based contraceptives and to preserve biodiversity through better assisted fertilization strategies.

  6. Study of ultrasonic thermometry based on ultrasonic time-of-flight measurement

    OpenAIRE

    Ruixi Jia; Qingyu Xiong; Lijie Wang; Kai Wang; Xuehua Shen; Shan Liang; Xin Shi

    2016-01-01

    Ultrasonic thermometry is a kind of acoustic pyrometry and it has been evolving as a new temperature measurement technology for various environment. However, the accurate measurement of the ultrasonic time-of-flight is the key for ultrasonic thermometry. In this paper, we study the ultrasonic thermometry technique based on ultrasonic time-of-flight measurement with a pair of ultrasonic transducers for transmitting and receiving signal. The ultrasonic transducers are installed in a single path...

  7. Ultrafast disk technology enables next generation micromachining laser sources

    Science.gov (United States)

    Heckl, Oliver H.; Weiler, Sascha; Luzius, Severin; Zawischa, Ivo; Sutter, Dirk

    2013-02-01

    Ultrashort pulsed lasers based on thin disk technology have entered the 100 W regime and deliver several tens of MW peak power without chirped pulse amplification. Highest uptime and insensitivity to back reflections make them ideal tools for efficient and cost effective industrial micromachining. Frequency converted versions allow the processing of a large variety of materials. On one hand, thin disk oscillators deliver more than 30 MW peak power directly out of the resonator in laboratory setups. These peak power levels are made possible by recent progress in the scaling of the pulse energy in excess of 40 μJ. At the corresponding high peak intensity, thin disk technology profits from the limited amount of material and hence the manageable nonlinearity within the resonator. Using new broadband host materials like for example the sesquioxides will eventually reduce the pulse duration during high power operation and further increase the peak power. On the other hand industry grade amplifier systems deliver even higher peak power levels. At closed-loop controlled 100W, the TruMicro Series 5000 currently offers the highest average ultrafast power in an industry proven product, and enables efficient micromachining of almost any material, in particular of glasses, ceramics or sapphire. Conventional laser cutting of these materials often requires UV laser sources with pulse durations of several nanoseconds and an average power in the 10 W range. Material processing based on high peak power laser sources makes use of multi-photon absorption processes. This highly nonlinear absorption enables micromachining driven by the fundamental (1030 nm) or frequency doubled (515 nm) wavelength of Yb:YAG. Operation in the IR or green spectral range reduces the complexity and running costs of industrial systems initially based on UV light sources. Where UV wavelength is required, the TruMicro 5360 with a specified UV crystal life-time of more than 10 thousand hours of continues

  8. Capacitance measurement of magnetic specific heat

    Science.gov (United States)

    King, A. R.; Belanger, D. P.; Nordblad, P.; Jaccarino, V.

    1984-03-01

    A new technique-low frequency capacitance (C) measurement-has been used to study the critical behavior of both isotropic and anisotropic antiferromagnets. We find that dC/dT is accurately proportional to the known magnetic specific heat Cm of FeF2. This indicates that both dɛ/dT and dl/dT scale with Cm. For cubic KNiF3, the critical exponent (Cm=At-α) has been found to be α=-0.151±.004 and A/A'=1.56±0.03. The experiments measured the capacitance of disk-shaped samples with a three-terminal capacitance technique. A ratio transformer bridge was employed, yielding a resolution in ΔC/C of about 10-8. The quality of the results is comparable to the best obtainable from conventional Cm and birefringence measurements.

  9. Carbon nanofiber supercapacitors with large areal capacitances

    KAUST Repository

    McDonough, James R.

    2009-01-01

    We develop supercapacitor (SC) devices with large per-area capacitances by utilizing three-dimensional (3D) porous substrates. Carbon nanofibers (CNFs) functioning as active SC electrodes are grown on 3D nickel foam. The 3D porous substrates facilitate a mass loading of active electrodes and per-area capacitance as large as 60 mg/ cm2 and 1.2 F/ cm2, respectively. We optimize SC performance by developing an annealing-free CNF growth process that minimizes undesirable nickel carbide formation. Superior per-area capacitances described here suggest that 3D porous substrates are useful in various energy storage devices in which per-area performance is critical. © 2009 American Institute of Physics.

  10. Signal processing electronics for a capacitive microsensor

    Science.gov (United States)

    Amendola, Gilles; Lu, Guo N.

    2000-04-01

    An interface circuit in a 0.8-micrometers CMOS process for the on- chip integration of a capacitive micro-sensor used as a microphone is presented. In order to circumvent 1/f noise contributions and to improve the signal/noise ratio, a synchronous modulation-demodulation technique has been applied. For the implementation of this technique, we have studied and designed several functional block, such as modulator with signal conversion, low-noise amplifier, demodulator, etc. To deal with problems related to dispersion of intrinsic capacitance of the sensor, a feedback compensating solution is suggested. The designed circuit has a sensibility of 1200 V/pF, with a minimum detectable capacitance variation of 2 10-6 pF.

  11. A high performance, variable capacitance accelerometer

    Science.gov (United States)

    Wilner, L. Bruce

    1988-12-01

    A variable capacitance acceleration sensor is described. Manufactured using silicon microfabrication techniques, the sensor uses a midplane, flat plate suspension, gas damping, and overrange stops. The sensor is assembled from three silicon wafers, using anodic bonds to inlays of borosilicate glass. Typical sensor properties are 7-pF active capacitance, 3-pF tare capacitance, a response of 0.05 pF/G, a resonance frequency of 3.4 kHz, and damping 0.7 critical. It is concluded that this sensor, with appropriate electronics, forms an accelerometer with an order-of-magnitude greater sensitivity-bandwidth product than a comparable piezoresistive acclerometer, and with extraordinary shock resistance.

  12. Analysis and prediction of dimensions and cost of laser micro-machining internal channel fabrication process

    Directory of Open Access Journals (Sweden)

    Brabazon D.

    2010-06-01

    Full Text Available This paper presents the utilisation of Response Surface Methodology (RSM as the prediction tool for the laser micro-machining process. Laser internal microchannels machined using pulsed Nd:YVO4 laser in polycarbonate were investigated. The experiments were carried out according to 33 factorial Design of Experiment (DoE. In this work the three input process set as control parameters were laser power, P; pulse repetition frequency, PRF; and sample translation speed, U. Measured responses were the channel width and the micro-machining operating cost per metre of produced microchannels. The responses were sufficiently predicted within the set micro-machining parameters limits. Two factorial interaction (2FI and quadratic polynomial regression equations for both responses were constructed. It is proposed that the developed prediction equations can be used to find locally optimal micro-machining process parameters under experimental and operational conditions.

  13. Design and fabrication of Electroplating Nickel Micromachined Probe with out-of-plane predeformation

    International Nuclear Information System (INIS)

    This paper present a new type of electroplating Nickel micromachined probes with out-of-plane predeformation for the next generation integrated circuit (IC) chip testing probe card application. It was fabricated using silicon bulk etching, Ti deposition and Ni electroplating process. We use the residual stress effect of thin films deposition to cause the flexible micromachined probe with a large out-of-plane predeformation and combine postelectroplating technique to further increase beam's thickness and therefore enhance its stiffness. The typical micromachined probe had a thickness 5∼10 μm, a width of 20 μm, and a length of 100 μm. The maximum deflection of the fabricated Nickel probe beam was 28 μm. This micromachined probe is capable of providing a very larger number of testing probe card, including the array pad format, and this designed also to satisfy the requirements for high frequency, high resolution and low cost wafer-level testing..

  14. Design and fabrication of an array type electron multiplier for radiation imaging by micromachining technique

    International Nuclear Information System (INIS)

    A new position sensitive array type electron multiplier using micromachining technique has been investigated. Here are described new miniature three dimensional structures for such a multichannel electron multiplies. Their design and preliminary processing are presented. (author)

  15. An integrated fluorescence activated cell sorter fabricated by femtosecond laser micromachining

    Directory of Open Access Journals (Sweden)

    Paié P.

    2013-11-01

    Full Text Available We present here a fully integrated fluorescence activated cell sorter (FACS, able to perform analysis at single cell level. This optofluidic device is obtained on a fused silica substrate with the use of femtosecond laser micromachining.

  16. Mobile ultrasonic testing in pipes

    International Nuclear Information System (INIS)

    The paper deals with the development of the ultrasonic test method, in particular with the functioning of the impulse reflection method which is used for weld testing and wall thickness measurement in pipeline construction. The paper closes on a few remarks on ultrasonic testing in plastic tubes and some other special testing problems. (RW)

  17. Surface micromachined counter-meshing gears discrimination device

    International Nuclear Information System (INIS)

    This paper discusses the design, fabrication and testing of a surface micromachined Counter-Meshing Gears (CMG) discrimination device which functions as a mechanically coded lock, A 24 bit code is input to unlock the device. Once unlocked, the device provides a path for an energy or information signal to pass through the device. The device is designed to immediately lock up if any portion of the 24 bit code is incorrect. The motivation for the development of this device is based on occurrences referred to as High Consequence Events, A High Consequence Event is an event where an inadvertent operation of a system could result in the catastrophic loss of life, property, or damage to the environment

  18. Hybrid electromagnetic and electrostatic micromachined suspension with adjustable dynamics

    Science.gov (United States)

    Poletkin, K.; Lu, Z.; Wallrabe, U.; Badilita, V.

    2015-12-01

    This paper introduces a novel design for a hybrid micromachined contactless suspension, whose operation is based on combining electromagnetic inductive and electrostatic actuation. Wirebonded microcoils provide the electromagnetic inductive actuation, while electrodes patterned on a Si wafer provide electrostatic control. The coil structure and the electrode structure are independently designed and fabricated, and are finally assembled into one device by flip-chip bonding. We demonstrate vertical linear positioning of an aluminium disk-shaped proof mass in a range from 30 to 200 μm based on the coil structure. The electrode structure is employed to dynamically adjust the stiffness components during the operation of the suspension, to control the tilting in a range from ±1° to ±4°, as well as to control the oscillation about the vertical axis with a displacement of 37° at about 1.5 Hz frequency.

  19. Experimental Investigation on Complex Structures Machining by Electrochemical Micromachining Technology

    Institute of Scientific and Technical Information of China (English)

    Liu Yong; Zhu Di; Zeng Yongbin; Huang Shaofu; Yu Hongbing

    2010-01-01

    Electrochemical micromachining(EMM)technology for fabricating micro structures is presented in this article.By applying ultra short pulses,dissolution of a workpiece can be restricted to the region very close to the electrode.First,an EMM system for meeting the requirements of the EMM process is established.Second,sets of experiments is carried out to investigate the influence of some of the predominant electrochemical process parameters such as electrical parameters,feed rate,electrode geometry features and electrolyte composition on machining quality,especially the influences of pulse on time on shape precision and working end shape of electrode on machined surface quality.Finally,after the preliminary experiments,a complex microstructure with good shape precision and surface quality is successfully obtained.

  20. Electrically tuneable micromachined fabry-perot interferometer in gas analysis

    Science.gov (United States)

    Blomberg, M.; Torkkeli, A.; Lehto, A.; Helenelund, Ch; Viitasalo, M.

    1997-01-01

    This paper describes an optical gas concentration measurement system, which is based on an electrically tuneable micromachined Fabry-Perot interferometer (FPI). The operating principle of the system is NDIR Single-Beam Dual-Wavelength measurement. The FPI is tuned so that the pass band coincides with the absorption band of the measured gas; a detector records the strength of the signal getting through the measurement chamber. The pass band of the FPI is then shifted to either side of the absorption band; the detected signal constitutes the reference signal. The ratio of these two signals indicates the degree of light absorption and so the gas concentration. Properties of the FPI are discussed, as well as the performance of the measurement system.

  1. A micromachined carbon nanotube film cantilever-based energy cell.

    Science.gov (United States)

    Gong, Zhongcheng; He, Yuan; Tseng, Yi-Hsuan; O'Neal, Chad; Que, Long

    2012-08-24

    This paper reports a new type of energy cell based on micromachined carbon nanotube film (CNF)-lead zirconate titanate cantilevers that is fabricated on silicon substrates. Measurements found that this type of micro-energy cell generates both AC voltages due to the self-reciprocation of the microcantilevers and DC voltages due to the thermoelectric effect upon exposure to light and thermal radiation, resulting from the unique optical and thermal properties of the CNF. Typically the measured power density of the micro-energy cell can be from 4 to 300 μW cm(-2) when it is exposed to sunlight under different operational conditions. It is anticipated that hundreds of integrated micro-energy cells can generate power in the range of milliwatts, paving the way for the construction of self-powered micro- or nanosystems. PMID:22842491

  2. Heavy ion beam micromachining on LiNbO3

    International Nuclear Information System (INIS)

    In this work 3D micromachining of x-cut lithium niobate crystals was performed using the high energy heavy ion microbeam (HIM) at the Tandar Laboratory, Buenos Aires. The samples were machined using 35Cl beams at 70 MeV bombarding energy combined with wet etching with hydrofluoric acid solutions at room temperature. As the ion beam penetrates the sample, it induces lattice damage increasing dramatically the local etching rate of the material. This technique was applied to the fabrication of 3D waveguides with long control electrodes. The resulting structures indicate that well defined contours with nearly vertical sidewalls can be made. The results also show that with fluences of only 5 x 1012 ions/cm2, this technique is suitable for the fabrication of different shapes of LiNbO3 control-waveguides that can be used in different optical devices and matched with the existing optical fibers.

  3. Solid polymer electrolyte composite membrane comprising laser micromachined porous support

    Science.gov (United States)

    Liu, Han; LaConti, Anthony B.; Mittelsteadt, Cortney K.; McCallum, Thomas J.

    2011-01-11

    A solid polymer electrolyte composite membrane and method of manufacturing the same. According to one embodiment, the composite membrane comprises a rigid, non-electrically-conducting support, the support preferably being a sheet of polyimide having a thickness of about 7.5 to 15 microns. The support has a plurality of cylindrical pores extending perpendicularly between opposing top and bottom surfaces of the support. The pores, which preferably have a diameter of about 5 microns, are made by laser micromachining and preferably are arranged in a defined pattern, for example, with fewer pores located in areas of high membrane stress and more pores located in areas of low membrane stress. The pores are filled with a first solid polymer electrolyte, such as a perfluorosulfonic acid (PFSA) polymer. A second solid polymer electrolyte, which may be the same as or different than the first solid polymer electrolyte, may be deposited over the top and/or bottom of the first solid polymer electrolyte.

  4. Femtosecond laser embedded grating micromachining of flexible PDMS plates

    Science.gov (United States)

    Cho, Sung-Hak; Chang, Won-Seok; Kim, Kwang-Ryul; Hong, Jong Wook

    2009-04-01

    We report on the femtosecond laser micromachining of photo-induced embedded diffraction grating in flexible Poly (Dimethly Siloxane) (PDMS) plates using a high-intensity femtosecond (130 fs) Ti: sapphire laser ( λp = 800 nm). The refractive index modifications with diameters ranging from 2 μm to 5 μm were photo-induced after the irradiation with peak intensities of more than 1 × 10 11 W/cm 2. The graded refractive index profile was fabricated to be a symmetric around from the center of the point at which femtosecond laser was focused. The maximum refractive index change (Δ n) was estimated to be 2 × 10 -3. By the X- Y- Z scanning of sample, the embedded diffraction grating in PDMS plate was fabricated successfully using a femtosecond laser.

  5. A Micro-Machined Gyroscope for Rotating Aircraft

    Directory of Open Access Journals (Sweden)

    Fuxue Zhang

    2012-07-01

    Full Text Available In this paper we present recent work on the design, fabrication by silicon micromachining, and packaging of a new gyroscope for stabilizing the autopilot of rotating aircraft. It operates based on oscillation of the silicon pendulum between two torsion girders for detecting the Coriolis force. The oscillation of the pendulum is initiated by the rolling and deflecting motion of the rotating carrier. Therefore, the frequency and amplitude of the oscillation are proportional to the rolling frequency and deflecting angular rate of the rotating carrier, and are measured by the sensing electrodes. A modulated pulse with constant amplitude and unequal width is obtained by a linearizing process of the gyroscope output signal and used to control the deflection of the rotating aircraft. Experimental results show that the gyroscope has a resolution of 0.008 °/s and a bias of 56.18 °/h.

  6. Fabrication of piezoresistive microcantilever using surface micromachining technique for biosensors

    Energy Technology Data Exchange (ETDEWEB)

    Na, Kwang-Ho [Department of Electrical Engineering and Nano-Bio Research Center, Myongji University, Yongin, Gyeonggido 449-728 (Korea, Republic of); Kim, Yong-Sang [Department of Electrical Engineering and Nano-Bio Research Center, Myongji University, Yongin, Gyeonggido 449-728 (Korea, Republic of); Kang, C.J. [Department of Physics and Nano-Bio Research Center, Myongji University, San38-2 Namdong, Yongin, Gyeonggido 449-728 (Korea, Republic of)]. E-mail: cjkang@mju.ac.kr

    2005-11-15

    A microcantilever-based biosensor with piezoresistor has been fabricated using surface micromachining technique, which is cost effective and simplifies a fabrication procedure. In order to evaluate the characteristics of the cantilever, the cystamine terminated with thiol was covalently immobilized on the gold-coated side of the cantilever and glutaraldehyde that would be bonded with amine group in the cystamine was injected subsequently. This process was characterized by measuring the deflection of the cantilever in real time monitoring. Using a piezoresistive read-out and a well-known optical beam deflection method as well, the measurement of deflection was carried out. The sensitivity of piezoresistive method is good enough compared with that of optical beam deflection method.

  7. Deep etch of GaN by laser micromachining

    Energy Technology Data Exchange (ETDEWEB)

    Mak, Giuseppe Y.; Lam, Edmund Y.; Choi, H.W. [Department of Electrical and Electronic Engineering, University of Hong Kong, Hong Kong (China)

    2010-07-15

    Trench formation for device isolation on GaN light-emitting diode (LED) wafers via nanosecond ultraviolet laser micromachining is demonstrated. Owing to the dissimilar ablation thresholds between GaN and sapphire, the etch process terminates automatically at the GaN/sapphire interface. It was found that optimal focus offset, optimal pulse energy and high repetition rate are essential for obtaining a trench with tapered sidewall and smooth bottom surface, which is suitable for the conformal deposition of interconnects across the trench. This technique has been successfully applied to the rapid prototyping of interconnected LED arrays on a single chip. (copyright 2010 WILEY-VCH Verlag GmbH and Co. KGaA, Weinheim) (orig.)

  8. Polymer/colloid surface micromachining: micropatterning of hybrid multilayers.

    Science.gov (United States)

    Mohammed, Javeed Shaikh; McShane, Mike

    2008-12-01

    Fabrication of multicomponent patterned films comprising polymer/nanoparticle multilayers using conventional lithography and bottom-up layer-by-layer nanofabrication techniques is described. The work is motivated by the potential to extend polymer surface micromachining capabilities toward construction of integrated systems by connecting discrete domains of active materials containing functional nanoparticles. Modified surfaces illustrate tunability of the physical (thickness, roughness, 3D structures) and chemical (inorganic/organic material combinations) properties of the nanocomposite micropatterns. Intriguing nanoscale phenomena were observed for the structures when the order of material deposition was changed; the final multilayer thickness and surface roughness and mechanical integrity of the patterns were found to be interdependent and related to the roughness of layers deposited earlier in the process. PMID:18989945

  9. Defect engineering and micromachining of Lithium Niobate by ion implantation

    International Nuclear Information System (INIS)

    A complete set of semi-empirical equations has been determined to engineer the damage formation in Lithium Niobate (LN) by irradiation with any ion atomic number and energy in the range 0.1-1.0 MeV/amu. Both nuclear and electronic process were taken into account and in particular the complex regime of sub-threshold electronic damage was quantitatively approached. The chemical etching of the processed material in 50 wt% HF at room temperature has been studied and the dependence of the etching rate on the damage concentration has been quantified. Finally, some test processes for surface micromachining of LN were first planned by using the above equations and then experimentally demonstrated.

  10. Activities on plasma ion source based micromachining system at VECC

    International Nuclear Information System (INIS)

    An RF inductively coupled plasma ion source with electrostatic focusing column is developed and optimized to generate high brightness, low energy spread ion beam which suits the needs of a focused ion beam system. Current density at the target plane is ∼ 500 mA/cm2 and thus the system is proved to be an appropriate one for high rate micromachining. Micro-patterning capabilities of the system are demonstrated by creating different kinds of patterns on silicon wafer, micro-drilling in metal foils etc. Measurements show that the currents in the range of 500 nA to 1 A can be focused to spots having diameters in the range of 8-10 m resulting in a current density of 450 mA/cm2 at the focused spot. (author)

  11. Defect engineering and micromachining of Lithium Niobate by ion implantation

    Energy Technology Data Exchange (ETDEWEB)

    Bianconi, M.; Bentini, G.G. [Consiglio Nazionale delle Ricerche, Istituto per la Microelettronica e i Microsistemi (CNR-IMM) and Laboratory MISTER, Via P. Gobetti 101, I-40129 Bologna (Italy); Chiarini, M. [Carlo Gavazzi Space S.p.A. - Sede di Bologna and Laboratory MISTER, Via Gobetti 101, 1-40129 Bologna (Italy); De Nicola, P. [Consiglio Nazionale delle Ricerche, Istituto per la Microelettronica e i Microsistemi (CNR-IMM) and Laboratory MISTER, Via P. Gobetti 101, I-40129 Bologna (Italy)], E-mail: denicola@bo.imm.cnr.it; Montanari, G.B. [Consiglio Nazionale delle Ricerche, Istituto per la Microelettronica e i Microsistemi (CNR-IMM) and Laboratory MISTER, Via P. Gobetti 101, I-40129 Bologna (Italy); Universita di Bologna - Dipartimento DEIS, Viale del Risorgimento 2, 1-40136 Bologna (Italy); Nubile, A.; Sugliani, S. [Consiglio Nazionale delle Ricerche, Istituto per la Microelettronica e i Microsistemi (CNR-IMM) and Laboratory MISTER, Via P. Gobetti 101, I-40129 Bologna (Italy)

    2009-09-01

    A complete set of semi-empirical equations has been determined to engineer the damage formation in Lithium Niobate (LN) by irradiation with any ion atomic number and energy in the range 0.1-1.0 MeV/amu. Both nuclear and electronic process were taken into account and in particular the complex regime of sub-threshold electronic damage was quantitatively approached. The chemical etching of the processed material in 50 wt% HF at room temperature has been studied and the dependence of the etching rate on the damage concentration has been quantified. Finally, some test processes for surface micromachining of LN were first planned by using the above equations and then experimentally demonstrated.

  12. Three-dimensional micromachining of silicon using a nuclear microprobe

    Energy Technology Data Exchange (ETDEWEB)

    Teo, E.J. E-mail: phytej@nus.edu.sg; Tavernier, E.P.; Breese, M.B.H.; Bettiol, A.A.; Watt, F.; Liu, M.H.; Blackwood, D.J

    2004-08-01

    We describe a novel technique for silicon microfabrication based on energetic mega-electron-volt (MeV) helium irradiation and subsequent electrochemical etching. The ion-induced damage in the irradiated regions slows down the porous silicon formation during electrochemical etching, producing a raised microstructure after cleaning in diluted potassium hydroxide solution. The thickness of the porous silicon layer formed depends on the accumulated fluence at each scan point. A relationship between the irradiated fluence and feature height is investigated on a p-type [1 0 0] silicon with a resistivity of 0.03 {omega} cm using focused 2 MeV helium beam. We use this relationship to micromachine multilevel structures with a single focused helium beam energy.

  13. Q-Switched Nd: YAG Laser Micro-Machining System

    International Nuclear Information System (INIS)

    In this paper, we present the design of a low cost Q-switched Nd: YAG laser micro-machining system for photo masks fabrication. It consists of: Nd:YAG laser source, beam delivery system, X-Y table, PC, The CCD camera and TV monitor. The synchronization between the laser source and the X-Y table is realised by NI PCI-7342, the two axis MID-7602 and LabVIEW based program. The first step of this work consists of engraving continuous and discontinuous lines on a thin film metal with a 100 μm resolution by using the YG 980 Quantel Q-switched Nd:YAG laser.

  14. ELECTROCHEMICAL MICROMACHINING USING VIBRATILE TUNGSTEN WIRE FOR HIGH-ASPECT-RATIO MICROSTRUCTURES

    OpenAIRE

    Wang, K

    2010-01-01

    Electrochemical micromachining can remove electrically conductive materials with the transferring of ions, so that high precision is achievable. A novel method for fabricating high-aspect-ratio microstructures by electrochemical micromachining using vibratile tungsten wire was proposed in this paper. The slight vibration of tungsten wire can improve the machining stability. The relations between the machining accuracy and machining parameters were experimentally studied. Micro groove with the...

  15. Differential search algorithm-based parametric optimization of electrochemical micromachining processes

    OpenAIRE

    Debkalpa Goswami; Shankar Chakraborty

    2014-01-01

    Electrochemical micromachining (EMM) appears to be a very promising micromachining process for having higher machining rate, better precision and control, reliability, flexibility, environmental acceptability, and capability of machining a wide range of materials. It permits machining of chemically resistant materials, like titanium, copper alloys, super alloys and stainless steel to be used in biomedical, electronic, micro-electromechanical system and nano-electromechanical system applicatio...

  16. Effects of Micromachining Processes on Electro-Osmotic Flow Mobility of Glass Surfaces

    OpenAIRE

    Norihisa Miki; Koichi Hishida; Reiko Kuriyama; Yohei Sato; Yosuke Koga

    2013-01-01

    Silica glass is frequently used as a device material for micro/nano fluidic devices due to its excellent properties, such as transparency and chemical resistance. Wet etching by hydrofluoric acid and dry etching by neutral loop discharge (NLD) plasma etching are currently used to micromachine glass to form micro/nano fluidic channels. Electro-osmotic flow (EOF) is one of the most effective methods to drive liquids into the channels. EOF mobility is affected by a property of the micromachined ...

  17. Effect of Axial Force on the Performance of Micromachined Vibratory Rate Gyroscopes

    OpenAIRE

    Zhengyi Niu; Xu Zhang; Peitao Dong; Zhihua Chen; Zhanqiang Hou; Dingbang Xiao; Xuezhong Wu

    2010-01-01

    It is reported in the published literature that the resonant frequency of a silicon micromachined gyroscope decreases linearly with increasing temperature. However, when the axial force is considerable, the resonant frequency might increase as the temperature increases. The axial force is mainly induced by thermal stress due to the mismatch between the thermal expansion coefficients of the structure and substrate. In this paper, two types of micromachined suspended vibratory gyroscopes with s...

  18. Sealing of micromachined cavities using chemical vapor deposition methods: characterization and optimization

    OpenAIRE

    Liu, Chang; Tai, Yu-Chong

    1999-01-01

    This paper presents results of a systematic investigation to characterize the sealing of micromachined cavities using chemical vapor deposition (CVD) methods. We have designed and fabricated a large number and variety of surface-micromachined test structures with different etch-channel dimensions. Each cavity is then subjected to a number of sequential CVD deposition steps with incremental thickness until the cavity is successfully sealed. At etch deposition interval, the sealing status of ev...

  19. Large enhancement of femtosecond laser micromachining speed in dye-doped hydrogel polymers.

    Science.gov (United States)

    Ding, Li; Jani, Dharmendra; Linhardt, Jeffrey; Künzler, Jay F; Pawar, Siddhesh; Labenski, Glen; Smith, Thomas; Knox, Wayne H

    2008-12-22

    Ophthalmologic hydrogel polymers are doped with Fluorescein or Coumarin dyes prior to the femtosecond laser micromachining process. We find that the achievable micromachining writing speed can be greatly increased while maintaining large refractive index changes (up to +0.08). Compared with previous results in dye-doped polymers that do not contain water such as PMMA, we obtain much larger index changes and much faster writing speeds. PMID:19104623

  20. Development of plasma ion source based micromachining system

    International Nuclear Information System (INIS)

    A compact high performance Inductively Coupled Plasma based (ICP) RF ion source operating at 13.56 MHz frequency is developed for production of low energy beams with micron size dimensions for high speed micromachining applications. To produce fine beams with high current density, ion source must produce high current ion beams with low energy spread and low divergence. Systematic characterizations have been carried out on the ion source and the extracted ion beams. The plasma source has exhibited a reduced brightness of 1x105 A/m2-sr-eV and ion energy spread of less than 5 eV. The angular current intensity of this source is >10 mA/Sr which is about three order higher than the traditional Liquid Metal Ion Source (LMIS). Ions are extracted by two electrode extraction system with 1 mm aperture and accelerated up to 8 KeV. Initial tests with the two lens focusing column, about 20 nA beam could be focused in 1.5 μm spot at working distance of 1 mm. The ion source life time and the stability has been excellent. Several experiments have been carried out to estimate the capability of this system for high micromachining applications. Various types of micro patterns have been created on Si wafer with Ar ion beam. Milling rate of > 1 μm3 are easily possible with this system. It is expected that with few more modifications in ion source as well as focusing column, milling rates of one order more and focused spot size of submicron dimensions can easily be achieved. (author)

  1. Ultrasonic inspection of austenitic welds

    International Nuclear Information System (INIS)

    The ultrasonic examination of austenitic stainless steel weld metal has always been regarded as a difficult proposition because of the large and variable ultrasonic attenuations and back scattering obtained from apparently similar weld deposits. The work to be described shows how the existence of a fibre texture within each weld deposit (as a result of epitaxial growth through successive weld beads) produces a systematic variation in the ultrasonic attenuation coefficient and the velocity of sound, depending upon the angle between the ultrasonic beam and the fibre axis. Development work has shown that it is possible to adjust the welding parameters to ensure that the crystallographic texture within each weld is compatible with improved ultrasonic transmission. The application of the results to the inspection of a specific weld in type 316 weld metal is described

  2. Ultrasonic dyeing of cellulose nanofibers.

    Science.gov (United States)

    Khatri, Muzamil; Ahmed, Farooq; Jatoi, Abdul Wahab; Mahar, Rasool Bux; Khatri, Zeeshan; Kim, Ick Soo

    2016-07-01

    Textile dyeing assisted by ultrasonic energy has attained a greater interest in recent years. We report ultrasonic dyeing of nanofibers for the very first time. We chose cellulose nanofibers and dyed with two reactive dyes, CI reactive black 5 and CI reactive red 195. The cellulose nanofibers were prepared by electrospinning of cellulose acetate (CA) followed by deacetylation. The FTIR results confirmed complete conversion of CA into cellulose nanofibers. Dyeing parameters optimized were dyeing temperature, dyeing time and dye concentrations for each class of the dye used. Results revealed that the ultrasonic dyeing produced higher color yield (K/S values) than the conventional dyeing. The color fastness test results depicted good dye fixation. SEM analysis evidenced that ultrasonic energy during dyeing do not affect surface morphology of nanofibers. The results conclude successful dyeing of cellulose nanofibers using ultrasonic energy with better color yield and color fastness results than conventional dyeing. PMID:26964959

  3. Development of a 3D capacitive gyroscope with reduced parasitic capacitance

    Science.gov (United States)

    Walther, A.; Desloges, B.; Lejuste, C.; Coster, B.; Audebert, P.; Willemin, J.

    2013-02-01

    We present the development of a technological platform dedicated to 3D capacitive inertial sensors. The proof of concept will be made on a 3D gyroscope. The mobile structure is made within a 30 µm thick Si top layer of a SOI substrate, while poly-Si deposited on top of a sacrificial PSG layer serves as suspended top electrodes and connection wires. This technology enables us to maintain low parasitic capacitance, which is of paramount significance for capacitive detection. After packaging and association with an analogue electronic board, functionality of the sensor is demonstrated.

  4. Development of a 3D capacitive gyroscope with reduced parasitic capacitance

    International Nuclear Information System (INIS)

    We present the development of a technological platform dedicated to 3D capacitive inertial sensors. The proof of concept will be made on a 3D gyroscope. The mobile structure is made within a 30 µm thick Si top layer of a SOI substrate, while poly-Si deposited on top of a sacrificial PSG layer serves as suspended top electrodes and connection wires. This technology enables us to maintain low parasitic capacitance, which is of paramount significance for capacitive detection. After packaging and association with an analogue electronic board, functionality of the sensor is demonstrated. (paper)

  5. Ultrasonic testing device

    International Nuclear Information System (INIS)

    The ultrasonic testing system serves to inspect welds and the adjoining heat-affected zones on reactor pressure vessels. The three-oscillator search unit has got either two external emitter crystal oscillators simultaneously loaded and an internal receiver crystal oscillator of equal width or vice versa. The inspection path is run through meanderingly. With the search unit there is succeeded to do the inspection by SEL technique, by SE technique with shear waves or by tandem technique. Loading of the oscillators is done with a time-multiplex method. (RW)

  6. A scanning microscopy technique based on capacitive coupling with a field-effect transistor integrated with the tip.

    Science.gov (United States)

    Shin, Kumjae; Kang, Dae sil; Lee, Sang hoon; Moon, Wonkyu

    2015-12-01

    We propose a method for measuring the capacitance of a thin layer using a Tip-on-Gate of Field-Effect Transistor (ToGoFET) probe. A ToGoFET probe with a metal-oxide-semiconductor field-effect transistor (MOSFET) with an ion-implant channel was embedded at the end of a cantilever and a Pt tip was fabricated using micro-machining. The ToGoFET probe was used to detect an alternating electric field at the dielectric surface. A dielectric buried metal sample was prepared; a sinusoidal input signal was applied to the buried metal lines; and the ToGoFET probe detected the electric field at the tip via the dielectric. The AC signal detected by the ToGoFET probe was demodulated by a simple AC-to-DC converter. Experimentally, it was shown that an electric field could be measured at the surface of the dielectric layer above a buried metal line. This promising result shows that it is possible to measure the surface local capacitance. PMID:26231315

  7. Ultrasonic Inspection Of Welds On Tube Fittings

    Science.gov (United States)

    Ray, Arjun N.; Nummelin, John L.

    1996-01-01

    Scanning ultrasonic apparatus designed for use in nondestructive inspection of electron-beam welds between heat-exchanger tube and end fittings. Includes ultrasonic probe, scanning mechanism, ultrasonic-signal-generating and -processing circuits, and computers. Not necessary to immerse any part of apparatus or tube/fitting assembly in water during inspection. Output ultrasonic-test signals displayed on computer to reveal defects.

  8. Quantum capacitance of the armchair-edge graphene nanoribbon

    Indian Academy of Sciences (India)

    Ling-Feng Mao

    2013-08-01

    The quantum capacitance, an important parameter in the design of nanoscale devices, is derived for armchair-edge single-layer graphene nanoribbon with semiconducting property. The quantum capacitance oscillations are found and these capacitance oscillations originate from the lateral quantum confinement in graphene nanoribbon. Detailed studies of the capacitance oscillations demonstrate that the local channel electrostatic potential at the capacitance peak, the height and the number of the capacitance peak strongly depend on the width, especially a few nanometres, of the armchair-edge graphene nanoribbon. It implies that the capacitance oscillations observed in the experiments can be utilized to measure the width of graphene nanoribbon. The results also show that the capacitance oscillations are not seen when the width is larger than 30 nm.

  9. Analysis of mutual capacitance and inductance of printed circuit

    OpenAIRE

    Ivanov, V. G.

    2014-01-01

    The article analyzes the mutual capacitance and inductance of printed circuit and introduces an evaluation technique for conductor-to-conductor capacitance under electrical connections tracing, the technique based on a multi-layer channel model.

  10. Observation of Quantum Capacitance of individual single walled carbon nanotubes

    OpenAIRE

    Dai, Junfeng; Li, Jun; Zeng, Hualing; Cui, Xiaodong

    2008-01-01

    We report a measurement on quantum capacitance of individual semiconducting and small band gap SWNTs. The observed quantum capacitance is remarkably smaller than that originating from density of states and it implies a strong electron correlation in SWNTs.

  11. Fabrication of capacitively-shunted superconducting qubits

    Science.gov (United States)

    Yoder, Jonilyn L.; Gudmundsen, Theodore J.; Bolkhovsky, Vladimir; Welander, Paul B.; Gustavsson, Simon; Hover, David; Kerman, Andrew J.; Sears, Adam P.; Oliver, William D.

    2014-03-01

    Improvements in superconducting qubit coherence times and reproducibility have been demonstrated using capacitive shunting. In this study, we present methods for the preparation of both capacitively-shunted charge qubits (transmons) and capacitively-shunted flux qubits. Hybrid fabrication techniques were employed to combine high-quality-factor aluminum capacitive shunts with shadow-evaporated Josephson junctions, and the Josephson junctions were prepared using suspended-bridge germanium masks. We also will describe process testing results that were acquired to assess wafer-to-wafer reproducibility of our fabrication protocols. This research was funded in part by the Office of the Director of National Intelligence (ODNI), Intelligence Advanced Research Projects Activity (IARPA); and by the Assistant Secretary of Defense for Research and Engineering under Air Force Contract number FA8721-05-C-0002. All statements of fact, opinion or conclusions contained herein are those of the authors and should not be construed as representing the official views or policies of IARPA, the ODNI, or the U.S. Government.

  12. Teaching of Inductive and Capacitive Reactance.

    Science.gov (United States)

    MacInnes, I.; Jeffrey, W. S.

    1983-01-01

    Discusses how understanding mechanical systems and their graphic representation can be of value when teaching inductive and capacitive reactance, in particular, the response of inductors and capacitors to an alternating potential difference. Suggests that mechanical systems be taught, not just before introducing reactance but earlier in the…

  13. Thermodynamic cycle analysis for capacitive deionization

    NARCIS (Netherlands)

    Biesheuvel, P.M.

    2009-01-01

    Capacitive deionization (CDI) is an ion removal technology based on temporarily storing ions in the polarization layers of two oppositely positioned electrodes. Here we present a thermodynamic model for the minimum work required for ion separation in the fully reversible case by describing the ionic

  14. Capacitive Proximity Sensors With Additional Driven Shields

    Science.gov (United States)

    Mcconnell, Robert L.

    1993-01-01

    Improved capacitive proximity sensors constructed by incorporating one or more additional driven shield(s). Sensitivity and range of sensor altered by adjusting driving signal(s) applied to shield(s). Includes sensing electrode and driven isolating shield that correspond to sensing electrode and driven shield.

  15. Phase-Discriminating Capacitive Sensor System

    Science.gov (United States)

    Vranish, John M.; Rahim, Wadi

    1993-01-01

    Crosstalk eliminated by maintaining voltages on all electrodes at same amplitude, phase, and frequency. Each output feedback-derived control voltage, change of which indicates proximity-induced change in capacitance of associated sensing electrode. Sensors placed close together, enabling imaging of sort. Images and/or output voltages used to guide robots in proximity to various objects.

  16. Capacitive Displacement Sensor With Frequency Readout

    Science.gov (United States)

    Fritsch, Klaus

    1989-01-01

    Simple displacement-measuring circuit senses capacitance between two parallel conducting plates and produces output signal, with frequency proportional to distance between plates. Principle of circuit provides advantages over other methods because of frequency-encoded output and high linearity. Used to measure displacements.

  17. Negative capacitance in multidomain ferroelectric superlattices

    Science.gov (United States)

    Zubko, Pavlo; Wojdeł, Jacek C.; Hadjimichael, Marios; Fernandez-Pena, Stéphanie; Sené, Anaïs; Luk’Yanchuk, Igor; Triscone, Jean-Marc; Íñiguez, Jorge

    2016-06-01

    The stability of spontaneous electrical polarization in ferroelectrics is fundamental to many of their current applications, which range from the simple electric cigarette lighter to non-volatile random access memories. Research on nanoscale ferroelectrics reveals that their behaviour is profoundly different from that in bulk ferroelectrics, which could lead to new phenomena with potential for future devices. As ferroelectrics become thinner, maintaining a stable polarization becomes increasingly challenging. On the other hand, intentionally destabilizing this polarization can cause the effective electric permittivity of a ferroelectric to become negative, enabling it to behave as a negative capacitance when integrated in a heterostructure. Negative capacitance has been proposed as a way of overcoming fundamental limitations on the power consumption of field-effect transistors. However, experimental demonstrations of this phenomenon remain contentious. The prevalent interpretations based on homogeneous polarization models are difficult to reconcile with the expected strong tendency for domain formation, but the effect of domains on negative capacitance has received little attention. Here we report negative capacitance in a model system of multidomain ferroelectric–dielectric superlattices across a wide range of temperatures, in both the ferroelectric and paraelectric phases. Using a phenomenological model, we show that domain-wall motion not only gives rise to negative permittivity, but can also enhance, rather than limit, its temperature range. Our first-principles-based atomistic simulations provide detailed microscopic insight into the origin of this phenomenon, identifying the dominant contribution of near-interface layers and paving the way for its future exploitation.

  18. Site Specific Evaluation of Multisensor Capacitance Probes

    Science.gov (United States)

    Multisensor capacitance probes (MCPs) are widely used for measuring soil water content (SWC) at the field scale. Although manufacturers supply a generic MCP calibration, many researchers recognize that MCPs should be calibrated for specific field conditions. MCPs measurements are typically associa...

  19. Capacitors and Resistance-Capacitance Networks.

    Science.gov (United States)

    Balabanian, Norman; Root, Augustin A.

    This programed textbook was developed under a contract with the United States Office of Education as Number 5 in a series of materials for use in an electrical engineering sequence. It is divided into three parts--(1) capacitors, (2) voltage-current relationships, and (3) simple resistance-capacitance networks. (DH)

  20. Inside-out electrical capacitance tomography

    DEFF Research Database (Denmark)

    Kjærsgaard-Rasmussen, Jimmy; Meyer, Knud Erik

    2011-01-01

    In this work we demonstrate the construction of an ‘inside-out’ sensor geometry for electrical capacitance tomography (ECT). The inside-out geometry has the electrodes placed around a tube, as usual, but measuring ‘outwards’. The flow between the electrodes and an outer tube is reconstructed; all...

  1. [Experience in developing and using capacitive electrodes].

    Science.gov (United States)

    Grishanovich, A P; Iarmolinskiĭ, V I

    1984-01-01

    A capacitive-type electrode using titanium or tantalum oxide obtained through anodizing is described. Incorporated in the electrode is a source for a buffer amplifier. A shielding cap is used as an indifferent electrode. High performance allows using the electrodes for ECG, EEG, and other signal recording in clinical practice and researches. PMID:6708763

  2. Ultrasonic flowmeter for JSFR

    International Nuclear Information System (INIS)

    The piping materials of the Japan Sodium-Cooled Fast Reactor (JSFR) at the commercialized stage, will be ferromagnetic materials Mod. 9-Cr steel.Therefore, it is not feasible to adopt the electromagnetic flowmeters used in conventional FBR plants. This paper describes the developmental status of the ultrasonic flowmeter system (USFM) as a substitute flow rate measurement system to JSFR. The features of the USFM are the following; In consideration of the double wall piping structure on JSFR, ultrasonic transducers should be installed directly on the surface of the inner primary coolant pipe. Therefore, the transducers should work properly under the temperature of 395 degrees Cat the rated power, and be replaced by remote replacement system; The transducer remote exchange system should maintain with air tightness between the inner primary coolant piping and the outer piping during the normal plant operation, apply appropriate pressure to the transducers against the inner primary coolant piping, and exchange the transducers without removing the outer piping under the maintenance outage; Multi-pass propagation time method is effective for detection of flow rate in the short entrance region (e.g. in the short straight piping) and the requirements of the signal processing equipment are the following; Linearity and repeatability of output signal : less than± 2% of Full Scale; Fluctuation rate of output signal : less than ± 5% of median; Response : less than 0.3 s; The USFM is designed as one of the Safety Protection System

  3. Ultrasonic Flowmeter for JSFR

    International Nuclear Information System (INIS)

    The piping materials of the Japan Sodium-Cooled Fast Reactor (JSFR) at the commercialized stage, will be ferromagnetic materials Mod. 9-Cr steel. Therefore, it is not feasible to adopt the electromagnetic flowmeters used in conventional FBR plants. This paper describes the developmental status of the ultrasonic flowmeter system (USFM) as a substitute flow rate measurement system for JSFR. The features of the USFM are the following; - In consideration of the double wall piping structure of JSFR, ultrasonic transducers should be installed directly on the surface of the inner primary coolant piping. Therefore, the transducers should work properly under 395 oC at the rated power, and be replaced by a remote replacement system. - The transducer remote replacement system should maintain the air tightness between the inner primary coolant piping and the outer piping during the normal plant operation, apply appropriate pressure to the transducers against the inner primary coolant piping, and replace the transducers without removing the outer piping under the maitenance outage. - The multi-pass propagation time method is effective for detection of the flow rate in the short entrance region (in the short straight piping). The requirements of the signal processor are the following; Linearity and repeatability of the output signal : ± 2% or less of full scale; Fluctuation rate of the output signal : ± 5% or less of the median; Response : 0.3 s or less. - The USFM is designed as one of the safety protection system. (author)

  4. A wafer level vacuum encapsulated capacitive accelerometer fabricated in an unmodified commercial MEMS process.

    Science.gov (United States)

    Merdassi, Adel; Yang, Peng; Chodavarapu, Vamsy P

    2015-01-01

    We present the design and fabrication of a single axis low noise accelerometer in an unmodified commercial MicroElectroMechanical Systems (MEMS) process. The new microfabrication process, MEMS Integrated Design for Inertial Sensors (MIDIS), introduced by Teledyne DALSA Inc. allows wafer level vacuum encapsulation at 10 milliTorr which provides a high Quality factor and reduces noise interference on the MEMS sensor devices. The MIDIS process is based on high aspect ratio bulk micromachining of single-crystal silicon layer that is vacuum encapsulated between two other silicon handle wafers. The process includes sealed Through Silicon Vias (TSVs) for compact design and flip-chip integration with signal processing circuits. The proposed accelerometer design is sensitive to single-axis in-plane acceleration and uses a differential capacitance measurement. Over ±1 g measurement range, the measured sensitivity was 1 fF/g. The accelerometer system was designed to provide a detection resolution of 33 milli-g over the operational range of ±100 g. PMID:25815451

  5. A Wafer Level Vacuum Encapsulated Capacitive Accelerometer Fabricated in an Unmodified Commercial MEMS Process

    Directory of Open Access Journals (Sweden)

    Adel Merdassi

    2015-03-01

    Full Text Available We present the design and fabrication of a single axis low noise accelerometer in an unmodified commercial MicroElectroMechanical Systems (MEMS process. The new microfabrication process, MEMS Integrated Design for Inertial Sensors (MIDIS, introduced by Teledyne DALSA Inc. allows wafer level vacuum encapsulation at 10 milliTorr which provides a high Quality factor and reduces noise interference on the MEMS sensor devices. The MIDIS process is based on high aspect ratio bulk micromachining of single-crystal silicon layer that is vacuum encapsulated between two other silicon handle wafers. The process includes sealed Through Silicon Vias (TSVs for compact design and flip-chip integration with signal processing circuits. The proposed accelerometer design is sensitive to single-axis in-plane acceleration and uses a differential capacitance measurement. Over ±1 g measurement range, the measured sensitivity was 1fF/g. The accelerometer system was designed to provide a detection resolution of 33 milli-g over the operational range of ±100 g.

  6. Anisotropic magneto-capacitance in ferromagnetic-plate capacitors

    OpenAIRE

    Haigh, J. A.; Ciccarelli, C; Betz, A. C.; Irvine, A; Novák, V.; Jungwirth, T.; Wunderlich, J.

    2015-01-01

    The capacitance of a parallel plate capacitor can depend on applied magnetic field. Previous studies have identified capacitance changes induced via classical Lorentz force or spin-dependent Zeeman effects. Here we measure a magnetization direction dependent capacitance in parallel-plate capacitors where one plate is a ferromagnetic semiconductor, gallium manganese arsenide. This anisotropic magneto-capacitance is due to the anisotropy in the density of states dependent on the magnetization t...

  7. Membrane capacitance techniques to monitor granule exocytosis in neutrophils.

    OpenAIRE

    Lollike, K; Lindau, M

    1999-01-01

    Cell membranes behave like electrical capacitors and changes in cell capacitance therefore reflect changes in the cell area. Monitoring capacitance can thus be used to study dynamic cellular phenomenon involving rapid changes in cell surface, such as exo- and/or endocytosis. In this review focus is on the use of capacitance techniques to study exocytosis in human neutrophils. We compare the whole-cell and the cell-attached capacitance techniques, and we review the complete literature dealing ...

  8. Negative Quantum Capacitance of Carbon Nanotube Field-Effect Transistors

    OpenAIRE

    Latessa, L.; Pecchia, A.; Di Carlo, A.; P. Lugli

    2004-01-01

    Atomistic density functional theory (DFT) calculations of the capacitance between a metallic cylindric gate and a carbon nanotube (CNT) are reported. Results stressing the predominant effect of quantum capacitance in limiting or even enhancing screening properties of the CNT are shown. Other contributions to the quantum capacitance beyond the electronic density of state (DOS) are pointed out. Negative values of the quantum capacitance are obtained for low-density systems, which correspondingl...

  9. MOS Capacitance-Voltage Characteristics:V.Methods to Enhance the Trapping Capacitance

    Institute of Scientific and Technical Information of China (English)

    揭斌斌; 薩支唐

    2012-01-01

    Low-frequency and High-frequency Capacitance-Voltage (C-V) curves of Silicon Metal-Oxide-Semiconductor Capacitors,showing electron and hole trapping at shallow-level dopant and deep-level generationrecombination-trapping impurities,are presented to illustrate the enhancement of the giant trapping capacitances by physical means via device and circuit designs,in contrast to chemical means via impurity characteristics previously reported.Enhancement is realized by masking the electron or/and hole storage capacitances to make the trapping capacitances dominant at the terminals.Device and materials properties used in the computed CV curves are selected to illustrate experimental realizations for fundamental trapping parameter characterizations and for electrical and optical signal processing applications.

  10. Vibration in The Ultrasonic Machining System

    Science.gov (United States)

    Zhang, Nan; Chen, Zhigang; Zhong, Xinrong

    The rotary ultrasonic machining system is the vibration system, using the characteristics of the ultrasonic resonance. Based on the ultrasonic vibration model, the dynamic characteristics of the ultrasonic machining system are analyzed, and using the wave equations, the dynamic characteristics of the horn with the exponential transition are analyzed. Based on FEM, the dynamic characteristics of the horn with the exponential transition in the rotary ultrasonic machining system are analyzed.

  11. Electric field theory and the fallacy of void capacitance

    OpenAIRE

    McAllister, Iain Wilson

    1991-01-01

    The concept of the capacitance of a gaseous void is discussed as applied to electrical insulation science. The most pertinent aspect of the capacitance definition is that of reference to a single-valued potential difference between surfaces. This implies that these surfaces must be surfaces of equipotential. With this essential characteristics the validity of void capacitance is examined

  12. Ultrasonic Transducer Irradiation Test Results

    Energy Technology Data Exchange (ETDEWEB)

    Daw, Joshua [Idaho National Lab. (INL), Idaho Falls, ID (United States); Palmer, Joe [Idaho National Lab. (INL), Idaho Falls, ID (United States); Ramuhalli, Pradeep [Pacific Northwest National Lab. (PNNL), Richland, WA (United States); Keller, Paul [Pacific Northwest National Lab. (PNNL), Richland, WA (United States); Montgomery, Robert [Pacific Northwest National Lab. (PNNL), Richland, WA (United States); Chien, Hual-Te [Argonne National Lab. (ANL), Argonne, IL (United States); Kohse, Gordon [MIT (Massachusetts Inst. of Technology), Cambridge, MA (United States); Tittmann, Bernhard [Pennsylvania State Univ., University Park, PA (United States); Reinhardt, Brian [Pennsylvania State Univ., University Park, PA (United States); Rempe, Joy [Rempe and Associates, Idaho Falls, ID (United States)

    2015-02-01

    Ultrasonic technologies offer the potential for high-accuracy and -resolution in-pile measurement of a range of parameters, including geometry changes, temperature, crack initiation and growth, gas pressure and composition, and microstructural changes. Many Department of Energy-Office of Nuclear Energy (DOE-NE) programs are exploring the use of ultrasonic technologies to provide enhanced sensors for in-pile instrumentation during irradiation testing. For example, the ability of small diameter ultrasonic thermometers (UTs) to provide a temperature profile in candidate metallic and oxide fuel would provide much needed data for validating new fuel performance models. Other ongoing efforts include an ultrasonic technique to detect morphology changes (such as crack initiation and growth) and acoustic techniques to evaluate fission gas composition and pressure. These efforts are limited by the lack of identified ultrasonic transducer materials capable of long term performance under irradiation test conditions. For this reason, the Pennsylvania State University (PSU) was awarded an ATR NSUF project to evaluate the performance of promising magnetostrictive and piezoelectric transducers in the Massachusetts Institute of Technology Research Reactor (MITR) up to a fast fluence of at least 1021 n/cm2. The goal of this research is to characterize and demonstrate magnetostrictive and piezoelectric transducer operation during irradiation, enabling the development of novel radiation-tolerant ultrasonic sensors for use in Material Testing Reactors (MTRs). As such, this test is an instrumented lead test and real-time transducer performance data is collected along with temperature and neutron and gamma flux data. The current work bridges the gap between proven out-of-pile ultrasonic techniques and in-pile deployment of ultrasonic sensors by acquiring the data necessary to demonstrate the performance of ultrasonic transducers. To date, one piezoelectric

  13. Irradiation Testing of Ultrasonic Transducers

    International Nuclear Information System (INIS)

    Ultrasonic technologies offer the potential for high accuracy and resolution in-pile measurement of numerous parameters, including geometry changes, temperature, crack initiation and growth, gas pressure and composition, and microstructural changes. Many Department of Energy-Office of Nuclear Energy (DOE-NE) programs are exploring the use of ultrasonic technologies to provide enhanced sensors for in-pile instrumentation during irradiation testing. For example, the ability of single, small diameter ultrasonic thermometers (UTs) to provide a temperature profile in candidate metallic and oxide fuel would provide much needed data for validating new fuel performance models. Other efforts include an ultrasonic technique to detect morphology changes (such as crack initiation and growth) and acoustic techniques to evaluate fission gas composition and pressure. These efforts are limited by the lack of existing knowledge of ultrasonic transducer material survivability under irradiation conditions. To address this need, the Pennsylvania State University (PSU) was awarded an Advanced Test Reactor National Scientific User Facility (ATR NSUF) project to evaluate promising magnetostrictive and piezoelectric transducer performance in the Massachusetts Institute of Technology Research Reactor (MITR) up to a fast fluence of at least 1021 n/cm2 (E> 0.1 MeV). This test will be an instrumented lead test; and real-time transducer performance data will be collected along with temperature and neutron and gamma flux data. By characterizing magnetostrictive and piezoelectric transducer survivability during irradiation, test results will enable the development of novel radiation tolerant ultrasonic sensors for use in Material and Test Reactors (MTRs). The current work bridges the gap between proven out-of-pile ultrasonic techniques and in-pile deployment of ultrasonic sensors by acquiring the data necessary to demonstrate the performance of ultrasonic transducers. (authors)

  14. Ultrasonic Transducer Irradiation Test Results

    International Nuclear Information System (INIS)

    Ultrasonic technologies offer the potential for high-accuracy and -resolution in-pile measurement of a range of parameters, including geometry changes, temperature, crack initiation and growth, gas pressure and composition, and microstructural changes. Many Department of Energy-Office of Nuclear Energy (DOE-NE) programs are exploring the use of ultrasonic technologies to provide enhanced sensors for in-pile instrumentation during irradiation testing. For example, the ability of small diameter ultrasonic thermometers (UTs) to provide a temperature profile in candidate metallic and oxide fuel would provide much needed data for validating new fuel performance models. Other ongoing efforts include an ultrasonic technique to detect morphology changes (such as crack initiation and growth) and acoustic techniques to evaluate fission gas composition and pressure. These efforts are limited by the lack of identified ultrasonic transducer materials capable of long term performance under irradiation test conditions. For this reason, the Pennsylvania State University (PSU) was awarded an ATR NSUF project to evaluate the performance of promising magnetostrictive and piezoelectric transducers in the Massachusetts Institute of Technology Research Reactor (MITR) up to a fast fluence of at least 1021 n/cm2. The goal of this research is to characterize and demonstrate magnetostrictive and piezoelectric transducer operation during irradiation, enabling the development of novel radiation-tolerant ultrasonic sensors for use in Material Testing Reactors (MTRs). As such, this test is an instrumented lead test and real-time transducer performance data is collected along with temperature and neutron and gamma flux data. The current work bridges the gap between proven out-of-pile ultrasonic techniques and in-pile deployment of ultrasonic sensors by acquiring the data necessary to demonstrate the performance of ultrasonic transducers. To date, one piezoelectric transducer and two

  15. Studying the mechanism of micromachining by short pulsed laser

    Science.gov (United States)

    Gadag, Shiva

    The semiconductor materials like Si and the transparent dielectric materials like glass and quartz are extensively used in optoelectronics, microelectronics, and microelectromechanical systems (MEMS) industries. The combination of these materials often go hand in hand for applications in MEMS such as in chips for pressure sensors, charge coupled devices (CCD), and photovoltaic (PV) cells for solar energy generation. The transparent negative terminal of the solar cell is made of glass on one surface of the PV cell. The positive terminal (cathode) on the other surface of the solar cell is made of silicon with a glass negative terminal (anode). The digital watches and cell phones, LEDs, micro-lens, optical components, and laser optics are other examples for the application of silicon and or glass. The Si and quartz are materials extensively used in CCD and LED for digital cameras and CD players respectively. Hence, three materials: (1) a semiconductor silicon and transparent dielectrics,- (2) glass, and (3) quartz are chosen for laser micromachining as they have wide spread applications in microelectronics industry. The Q-switched, nanosecond pulsed lasers are most extensively used for micro-machining. The nanosecond type of short pulsed laser is less expensive for the end users than the second type, pico or femto, ultra-short pulsed lasers. The majority of the research work done on these materials (Si, SiO 2, and glass) is based on the ultra-short pulsed lasers. This is because of the cut quality, pin point precision of the drilled holes, formation of the nanometer size microstructures and fine features, and minimally invasive heat affected zone. However, there are many applications such as large surface area dicing, cutting, surface cleaning of Si wafers by ablation, and drilling of relatively large-sized holes where some associated heat affected zone due to melting can be tolerated. In such applications the nanosecond pulsed laser ablation of materials is very

  16. Properties of ultrasonic testing systems

    International Nuclear Information System (INIS)

    For a long time, ultrasonic testing of reactor components and plants whose safety had to meet high demands, lacked definitions of the required properties of the ultrasonic testing system. The standard draft DIN 25 450 states demands on the ultrasonic testing unit and the test heads and recommends measuring methods to determine their properties. With test units and test heads meeting the demands of the draft a better reproducibility of the test is obtained than before; the improved test statement results in an increased safety during production and operation of components and plants. (orig./HP)

  17. Fundamentals of ultrasonic phased arrays

    CERN Document Server

    Schmerr, Lester W

    2014-01-01

    This book describes in detail the physical and mathematical foundations of ultrasonic phased array measurements.?The book uses linear systems theory to develop a comprehensive model of the signals and images that can be formed with phased arrays. Engineers working in the field of ultrasonic nondestructive evaluation (NDE) will find in this approach a wealth of information on how to design, optimize and interpret ultrasonic inspections with phased arrays. The fundamentals and models described in the book will also be of significant interest to other fields, including the medical ultrasound and

  18. Pulsed ultrasonic stir welding method

    Science.gov (United States)

    Ding, R. Jeffrey (Inventor)

    2013-01-01

    A method of performing ultrasonic stir welding uses a welding head assembly to include a plate and a rod passing through the plate. The rod is rotatable about a longitudinal axis thereof. In the method, the rod is rotated about its longitudinal axis during a welding operation. During the welding operation, a series of on-off ultrasonic pulses are applied to the rod such that they propagate parallel to the rod's longitudinal axis. At least a pulse rate associated with the on-off ultrasonic pulses is controlled.

  19. A capacitive power sensor based on the MEMS cantilever beam fabricated by GaAs MMIC technology

    International Nuclear Information System (INIS)

    In this paper, a novel capacitive power sensor based on the microelectromechanical systems (MEMS) cantilever beam at 8–12 GHz is proposed, fabricated and tested. The presented design can not only realize a cantilever beam instead of the conventional fixed–fixed beam, but also provide fine compatibility with the GaAs monolithic microwave integrated circuit (MMIC) process. When the displacement of the cantilever beam is very small compared with the initial height of the air gap, the capacitance change between the measuring electrode and the cantilever beam has an approximately linear dependence on the incident radio frequency (RF) power. Impedance compensating technology, by modifying the slot width of the coplanar waveguide transmission line, is adopted to minimize the effect of the cantilever beam on the power sensor; its validity is verified by the simulation of high frequency structure simulator software. The power sensor has been fabricated successfully by Au surface micromachining using polyimide as the sacrificial layer on the GaAs substrate. Optimization of the design with impedance compensating technology has resulted in a measured return loss of less than −25 dB and an insertion loss of around 0.1 dB at 8–12 GHz, which shows the slight effect of the cantilever beam on the microwave performance of this power sensor. The measured capacitance change starts from 0.7 fF to 1.3 fF when the incident RF power increases from 100 to 200 mW and an approximate linear dependence has been obtained. The measured sensitivities of the sensor are about 6.16, 6.27 and 6.03 aF mW−1 at 8, 10 and 12 GHz, respectively. (paper)

  20. Computer automation of ultrasonic testing. [inspection of ultrasonic welding

    Science.gov (United States)

    Yee, B. G. W.; Kerlin, E. E.; Gardner, A. H.; Dunmyer, D.; Wells, T. G.; Robinson, A. R.; Kunselman, J. S.; Walker, T. C.

    1974-01-01

    Report describes a prototype computer-automated ultrasonic system developed for the inspection of weldments. This system can be operated in three modes: manual, automatic, and computer-controlled. In the computer-controlled mode, the system will automatically acquire, process, analyze, store, and display ultrasonic inspection data in real-time. Flaw size (in cross-section), location (depth), and type (porosity-like or crack-like) can be automatically discerned and displayed. The results and pertinent parameters are recorded.

  1. Influence of ultrasonic cavitation on passive film of stainless steel.

    Science.gov (United States)

    Wang, Bao-Cheng; Zhu, Jin-hua

    2008-03-01

    The electrochemical behaviors of passive film of stainless steel 0Cr13Ni5Mo under the condition of static state (quiescence) and ultrasonic cavitation in the HCl solution have been studied by means of polarization curve, electrochemical impedance spectroscopy (EIS) and capacitance potential measurement. The results indicate that the passive film shows a multi layer structure distribution, and presents a p-type semiconductor property under the condition of quiescence. The stability of passive film decreases, the semiconducting property changes to an n-type semiconductor in the presence of cavitation. The amount of transition electrons from valence band because of cavitation is related to the height of Fermi level of passive film semiconductor. PMID:17584517

  2. Ultrasonic decontamination robot

    International Nuclear Information System (INIS)

    A method is described of removing radioactive contamination from a primary fluid header of a steam generator between periods of active operation thereof, the header having a sealable access manway therein to permit access to interior surfaces of the header. The method consists of: inserting through the header manway into the interior thereof a robotic arm having a base portion sized to fit sealably in the manway, an ultrasonic decontamination head disposed to be movable at an end of the robotic arm, a solvent supply tube connected to the decontamination head, and a fluid removal conduit disposed at a low point in the interior of the header; sealing the base portion in the header manway

  3. Ultrasonic inspection methodology

    International Nuclear Information System (INIS)

    Steam generator tubes are known to be susceptible to stress corrosion cracking (SCC). Primary water SCC (PWSCC) and more recently secondary water SCC (SWSCC) have been observed in some Belgian plants. To help dealing with these problems, Laborelec developed an ultrasonic (UT) inspection system. It has been used for the last two years on a sampling basis in several plants. The field and laboratory measurements confirmed the advantage of using UT for the early detection of small circumferential cracks while an excellent correlation was demonstrated between eddy current RPC and UT for axial PWSCC. In conclusion: The latest in-service inspections demonstrated an average measurement cycle of 50 to 60 seconds per tube including the manipulator displacement from tube to tube. A sample of about 250 tubes with axial cracks was measured on-site with the eddy current RPC technique and the new UT system. All the UT measured lengths were within ± 1.5 mm of the RPC results. The same results were obtained from the inspection of the tubes repaired with the nickel process (Doel 3). Some indications of circumferential secondary side stress corrosion cracking were recently observed. A comparison with the eddy current rotating pancake coil confirmed the improved detectability of the UT system. The field and laboratory results obtained with this UT inspection system demonstrated the advantage of applying the ultrasonic technique for the detection and sizing of small volume cracks like SCC. Also, the small focal spot of the UT beam provided a clear advantage for the detection of circumferential PWSCC in the presence of multiple axial cracks. With an average rate dose to 60 tubes per hour for the top of the tubesheet area, this UT system can be considered as an industrial tool for the inspection of steam generator tubes

  4. Ultrasonic extensometer measures bolt preload

    Science.gov (United States)

    Daniels, C. M., Jr.

    1978-01-01

    Extensometer using ultrasonic pulse reflections to measure elongations in tightened belts and studs is much more accurate than conventional torque wrenches in application of specified preload to bolts and other threaded fasteners.

  5. Tools for ultrasonic hot embossing

    OpenAIRE

    Liao, Sijie

    2016-01-01

    Ultrasonic hot embossing is an emerging technology enabling molding of thermo-plastic polymers in seconds. A stack of polymer foils is heated by the friction between the foils and protruding microstructures on a tool when ultrasonic vibrations are generated by a sonotrode. The polymer is molten and adapts to the shape of the microstructures on the tool. Thus, a micro structure is generated in much shorter time than by injection molding or hot embossing. The objective of this work was investig...

  6. Ultrasonic Evaluation of Well Integrity

    OpenAIRE

    Hoel, Kristian

    2014-01-01

    This thesis presents the acoustic theory behind current ultrasonic cement evaluation tools. The UltraSonic Imager tool's pulse echo technique and the new Isolation Scanner tool's pitch-catch leaky lamb wave measuring technique is explained. A laboratory experiment is conducted on a steel casing set-up (BeCaLoS) designed by SINTEF Petroleum Research to test, and highlight weaknesses of these measuring techniques. Both evaluation methods are successfully performed under four differen...

  7. Layer resolved capacitive probing of graphene bilayers

    Science.gov (United States)

    Zibrov, Alexander; Parmentier, François; Li, Jia; Wang, Lei; Hunt, Benjamin; Dean, Cory; Hone, James; Taniguchi, Takashi; Watanabe, Kenji; Young, Andrea

    Compared to single layer graphene, graphene bilayers have an additional ``which-layer'' degree of freedom that can be controlled by an external electric field in a dual-gated device geometry. We describe capacitance measurements capable of directly probing this degree of freedom. By performing top gate, bottom gate, and penetration field capacitance measurements, we directly extract layer polarization of both Bernal and twisted bilayers. We will present measurements of hBN encapsulated bilayers at both zero and high magnetic field, focusing on the physics of the highly degenerate zero-energy Landau level in the high magnetic field limit where spin, valley, and layer degeneracy are all lifted by electronic interactions.

  8. A simple and reproducible capacitive electrode.

    Science.gov (United States)

    Spinelli, Enrique; Guerrero, Federico; García, Pablo; Haberman, Marcelo

    2016-03-01

    Capacitive Electrodes (CE) allow the acquisition of biopotentials through a dielectric layer, without the use of electrolytes, just by placing them on skin or clothing, but demands front-ends with ultra-high input impedances. This must be achieved while providing a path for bias currents, calling for ultra-high value resistors and special components and construction techniques. A simple CE that uses bootstrap techniques to avoid ultra-high value components and special materials is proposed. When electrodes are placed on the skin; that is, with coupling capacitances CS of around 100 pF, they present a noise level of 3.3 µVRMS in a 0.5-100 Hz bandwidth, which is appropriate for electrocardiography (ECG) measurements. Construction details of the CE and the complete circuit, including a fast recovery feature, are presented. PMID:26792172

  9. Development of a capacitive bioimpedance measurement system

    OpenAIRE

    Gómez Abad, Daniel

    2009-01-01

    Bioelectrical impedance spectroscopy (BIS) is a well-established and non-invasive method to determine and monitor body composition. Commercially available bioelectrical impedance systems use coated hydrogel-aluminium electrodes, where the hydrogel acts as an adhesive and as an electrolytic medium. The gel/adhesive is physiologically inert over short periods. However, when used over longer periods, hydrogel-aluminium electrodes present limitations, which capacitive electrodes ma...

  10. Performance relations in Capacitive Deionization systems

    OpenAIRE

    Limpt, van, C.

    2010-01-01

    Capacitive Deionization (CDI) is a relatively new deionization technology based on the temporary storage of ions on an electrically charged surface. By directing a flow between two oppositely charged surfaces, negatively charged ions will adsorb onto the positively charged surface, and positively charged ions will adsorb onto the negatively charged surface. To optimize CDI design for various applications, performance relations in CDI systems have to be understood. CDI performance is determine...

  11. Ultra-High-Frequency Capacitive Displacement Sensor

    Science.gov (United States)

    Vanzandt, Thomas R.; Kenny, Thomas W.; Kaiser, William J.

    1994-01-01

    Improved class of compact, high-resolution capacitive displacement sensors operates at excitation frequency of 915 MHz and measures about 7.5 by 4 by 2 centimeters. Contains commercially available 915-MHz oscillator and transmission-line resonator. Resonator contains stripline inductor in addition to variable capacitor. Ultrahigh excitation frequency offers advantages of resolution and frequency response. Not deleteriously affected by mechanical overdriving, or contact between electrodes.

  12. Capacitive Sensors And Targets Would Measure Alignments

    Science.gov (United States)

    Jenstrom, Del T.

    1994-01-01

    Multiple capacitive sensors and active targets used to measure distance between, and relative orientation of, two objects. Sensed target signals processed and used by control systems to align objects to be joined. Shapes, sizes, and layouts of sensors and targets optimized for specific application. Particular layout of targets and sensors enables determination of relative position and orientation of two objects in all six degrees of freedom.

  13. The fringe capacitance formula of microstructures

    International Nuclear Information System (INIS)

    This paper presents a fringe capacitance formula of microstructures. The formula is derived by curve fitting on ANSYS simulation results. Compared with the ANSYS and experimental results, the deviation is within ±2%. The application to determine the pull-in voltage of an electrostatic micro-beam is demonstrated, which agrees very well with the experimental data. The formula presented is very accurate, yields explicit physical meanings and is applicable to common dimension ranges for MEMS devices. (paper)

  14. Periodic surface pattern fabrication via biprism interference micro-machining

    Science.gov (United States)

    Saxena, Ishan; Liu, Jintao; Ehmann, Kornel; Cao, Jian

    2015-12-01

    A novel surface micro-texturing process is proposed that is capable of generating extremely scalable periodic patterns on a workpiece surface. The process, henceforth named as ‘biprism interference micro-machining’ utilizes a two-beam interference pattern generated by a Fresnel biprism placed coaxially in the path of a laser pulse to fabricate periodic micro-channels on aluminum surfaces. The channels were fabricated over an area of approximately 8 mm × 6 mm and with a periodicity of 9 and 21 μm, by using custom-built two-faceted biprisms with side angles of 4° and 1.5°, respectively. A beam propagation simulation was carried out to predict the intensity distribution and contrast of the intensity pattern of laser pulse at the workpiece surface. The entire process takes 1-8 laser pulses, thereby demonstrating ultra-fast speed and scalability. Also, the efficiency, precision and resolution of the process are higher than that of conventional mask-based and interference-based micro-machining.

  15. 1 THz Micromachined Waveguide Band-Pass Filter

    Science.gov (United States)

    Liu, Shuang; Hu, Jiang; Zhang, Yong; Zheng, Zhongwan; Liu, Yupeng; Xu, Ruimin; Xue, Quan

    2016-05-01

    This paper presents a waveguide band-pass filter operating at the 0.75 ˜ 1.1 THz frequency band. The metal conductivity, the surface impedance, and the skin depth are investigated in the terahertz (THz) frequency band for more accurate designs, especially at the 1 THz and higher frequencies. Because the influence of the fabrication tolerance on the component performance cannot be negligible while the frequency increases, it is a necessary to adopt the simple structure with less resonant cavities for obtaining the given performance. Therefore, the filter in this paper is designed based on the TE301/TE102 dual-mode rectangular waveguide resonant cavities, which has fewer cavities and better rejection of the stop-band. The proposed filter is fabricated using the deep reactive ion etching (DRIE) micromachining technique. Measured results are in good agreement with simulations, which verifies the accuracy of the analysis above, and the design process is valuable to realize high-performance passive components while the frequency is up to 1 THz or higher frequencies.

  16. Thermoelectric Device Fabrication Using Thermal Spray and Laser Micromachining

    Science.gov (United States)

    Tewolde, Mahder; Fu, Gaosheng; Hwang, David J.; Zuo, Lei; Sampath, Sanjay; Longtin, Jon P.

    2016-02-01

    Thermoelectric generators (TEGs) are solid-state devices that convert heat directly into electricity. They are used in many engineering applications such as vehicle and industrial waste-heat recovery systems to provide electrical power, improve operating efficiency and reduce costs. State-of-art TEG manufacturing is based on prefabricated materials and a labor-intensive process involving soldering, epoxy bonding, and mechanical clamping for assembly. This reduces their durability and raises costs. Additive manufacturing technologies, such as thermal spray, present opportunities to overcome these challenges. In this work, TEGs have been fabricated for the first time using thermal spray technology and laser micromachining. The TEGs are fabricated directly onto engineering component surfaces. First, current fabrication techniques of TEGs are presented. Next, the steps required to fabricate a thermal spray-based TEG module, including the formation of the metallic interconnect layers and the thermoelectric legs are presented. A technique for bridging the air gap between two adjacent thermoelectric elements for the top layer using a sacrificial filler material is also demonstrated. A flat 50.8 mm × 50.8 mm TEG module is fabricated using this method and its performance is experimentally characterized and found to be in agreement with expected values of open-circuit voltage based on the materials used.

  17. Micromachined force sensors using thin film nickel–chromium piezoresistors

    International Nuclear Information System (INIS)

    Micromachined force/tactile sensors using nickel–chromium piezoresistors have been investigated experimentally and through finite-element analysis. The force sensors were designed with a suspended aluminum oxide (Al2O3) membrane and optimally placed piezoresistors to measure the strain in the membrane when deflected with an applied force. Different devices, each with varying size and shape of both the membrane and the piezoresistors, were designed, fabricated and characterized. The piezoresistors were placed into a half-Wheatstone bridge configuration with two active and two passive nickel–chromium resistors to provide temperature drift compensation. The force sensors were characterized using a load cell and a nanopositioner to measure the sensor response with applied load. Piezoresistive gauge factors in the range of 1–5.2 have been calculated for the thin film nichrome (NiCr 80/20 wt%) from the measured results. The force sensors were calculated to have a noise equivalent force of 65–245 nN. (paper)

  18. Micromachined magnetometer-accelerometer for a navigation system

    Science.gov (United States)

    Cho, Ji-Man; Kim, Kyung S.; An, Seungdo; Park, HoJoon; Hahm, Ghun

    2002-11-01

    A new type of magnetometer-accelerometer is developed with a silicon micromachining. The operation principle of the sensor is based on the well known Lorentz force caused by the interaction of a current and an external magnetic field on a suspended conducting beam. To realize a new resonant micro sensor detecting both acceleration and the geomagnetic field simultaneously, a conducting line is formed on a spring part of a silicon accelerometer having two mass plates. And a new Samsung MEMS fabrication process is developed for this sensor. The process uses a silicon-on-glass (SOG) wafer, an inverted SOG wafer, and a gold-silicon eutectic bonding for the wafer-level hermetic packaging. To operate the sensor, an ac current of its mechanical resonant frequency is driven through the conducting line. Totally 1 mW is consumed in the current driving element. This newly developed sensor is enough for the 10 degree electronic display of the orientation angle and can be used in a portable navigator such as SmartPhones and PDAs that need a small, low cost and low power electronic compass.

  19. Towards a Casimir Force Measurement between Micromachined Parallel Plate Structures

    Directory of Open Access Journals (Sweden)

    Remco J. Wiegerink

    2012-11-01

    Full Text Available Ever since its prediction, experimental investigation of the Casimir force has been of great scientific interest. Many research groups have successfully attempted quantifying the force with different device geometries; however, measurement of the Casimir force between parallel plates with sub-micron separation distance is still a challenging task, since it becomes extremely difficult to maintain sufficient parallelism between the plates. The Casimir force can significantly influence the operation of micro devices and to realize reliable and reproducible devices it is necessary to understand and experimentally verify the influence of the Casimir force at sub-micron scale. In this paper, we present the design principle, fabrication and characterization of micromachined parallel plate structures that could allow the measurement of the Casimir force with tunable separation distance in the range of 100 to 1000 nm. Initially, a gold coated parallel plate structure is explored to measure the Casimir force, but also other material combinations could be investigated. Using gold-silicon eutectic bonding, a reliable approach to bond chips with integrated suspended plates together with a well-defined separation distance in the order of 1–2 μm is developed.

  20. Adaptable acylindrical microlenses fabricated by femtosecond laser micromachining

    Science.gov (United States)

    Paiè, Petra; Bragheri, Francesca; Claude, Theo; Osellame, Roberto

    2015-03-01

    Microfluidic lenses are a powerful tool for many lab on a chip applications ranging from sensing to detection and also to imaging purpose, with the great advantage to increase the degree of integration and compactness of these micro devices. In this work we present the realization of such a compact microfluidic lens with reconfigurable optical properties. The technique used to realize the device we present is femtosecond laser micromachining followed by chemical etching, which allows to easily fabricate 3D microfluidic devices with an arbitrary shape. Thanks to that it has been possible to easily fabricate different lens made up by cylindrical microchannel in fused silica glasses filled with liquids with a proper refractive index. The optical properties of these devices are tested and shown to be in a good agreement with the theoretical model previously implemented. Furthermore we have also optimized the design of these microlenses in order to reduce the effects of spherical aberrations in the focal region, thus allowing us to obtain a set of different acylindrical microfluidic lenses, whose validation is also reported. In this work the lens adaptability can be achieved by replacing the liquid inside the microchannel, so that we can easily tune the feature of the focused beam. Thus increasing the possible range of applications of these micro optical elements, as an example we report on the validation of the device as a fast integrated optofluidic shutter.

  1. Laser micromachining as a metallization tool for microfluidic polymer stacks

    International Nuclear Information System (INIS)

    A novel assembly approach for the integration of metal structures into polymeric microfluidic systems is described. The presented production process is completely based on a single solid-state laser source, which is used to incorporate metal foils into a polymeric multi-layer stack by laser bonding and ablation processes. Chemical reagents or glues are not required. The polymer stack contains a flexible membrane which can be used for realizing microfluidic valves and pumps. The metal-to-polymer bond was investigated for different metal foils and plasma treatments, yielding a maximum peel strength of Rps = 1.33 N mm−1. A minimum structure size of 10 µm was determined by 3D microscopy of the laser cut line. As an example application, two different metal foils were used in combination to micromachine a standardized type-T thermocouple on a polymer substrate. An additional laser process was developed which allows metal-to-metal welding in close vicinity to the polymer substrate. With this process step, the reliability of the electrical contact could be increased to survive at least 400 PCR temperature cycles at very low contact resistances. (paper)

  2. Micromachining of Soft Polymer Material applying Cryogenic Cooling

    Science.gov (United States)

    Kakinuma, Yasuhiro; Yasuda, Nobuhito; Aoyama, Tojiro

    Polydimethylsiloxane (PDMS) is one of the important materials for microfluidic chips. The pattern of micro channels on the PDMS plate is usually fabricated through the photolithography and micro molding process. However, the photolithographic method requires multi chemical and mechanical processes and resultant long process time. The micro milling process is a feasible method for rapid fabrication of various patterns of micro channels. However, micromachining has not yet been applied to soft polymer materials. It is difficult to machine elastic materials such as PDMS because of their low toughness. In order to machine a micro grooves on soft polymer materials, the cutting process applying cryogenic cooling is proposed because the elastic properties of soft polymer materials remarkably change from rubbery state to glassy state below the glass transition temperature. In this study, the freezing milling method using liquid nitrogen is applied to the micro grooving of PDMS. The result of a cutting test shows that micro grooves can be shaped easily and machined accurately in PDMS by the proposed method.

  3. Giant flexoelectric polarization in a micromachined ferroelectric diaphragm

    KAUST Repository

    Wang, Zhihong

    2012-08-14

    The coupling between dielectric polarization and strain gradient, known as flexoelectricity, becomes significantly large on the micro- and nanoscale. Here, it is shown that giant flexoelectric polarization can reverse remnant ferroelectric polarization in a bent Pb(Zr0.52Ti0.48) O3 (PZT) diaphragm fabricated by micromachining. The polarization induced by the strain gradient and the switching behaviors of the polarization in response to an external electric field are investigated by observing the electromechanical coupling of the diaphragm. The method allows determination of the absolute zero polarization state in a PZT film, which is impossible using other existing methods. Based on the observation of the absolute zero polarization state and the assumption that bending of the diaphragm is the only source of the self-polarization, the upper bound of flexoelectric coefficient of PZT film is calculated to be as large as 2.0 × 10-4 C m -1. The strain gradient induced by bending the diaphragm is measured to be on the order of 102 m-1, three orders of magnitude larger than that obtained in the bulk material. Because of this large strain gradient, the estimated giant flexoelectric polarization in the bent diaphragm is on the same order of magnitude as the normal remnant ferroelectric polarization of PZT film. Copyright © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

  4. Silicon micromachining using a high-density plasma source

    Energy Technology Data Exchange (ETDEWEB)

    McAuley, S.A.; Ashraf, H.; Atabo, L.; Chambers, A.; Hall, S.; Hopkins, J.; Nicholls, G. [Surface Technology Systems, Imperial Park, Newport (United Kingdom)

    2001-09-21

    Dry etching of Si is critical in satisfying the demands of the micromachining industry. The micro-electro-mechanical systems (MEMS) community requires etches capable of high aspect ratios, vertical profiles, good feature size control and etch uniformity along with high throughput to satisfy production requirements. Surface technology systems' (STS's) high-density inductively coupled plasma (ICP) etch tool enables a wide range of applications to be realized whilst optimizing the above parameters. Components manufactured from Si using an STS ICP include accelerometers and gyroscopes for military, automotive and domestic applications. STS's advanced silicon etch (ASE{sup TM}) has also allowed the first generation of MEMS-based optical switches and attenuators to reach the marketplace. In addition, a specialized application for fabricating the next generation photolithography exposure masks has been optimized for 200 mm diameter wafers, to depths of {approx}750 {mu}m. Where the profile is not critical, etch rates of greater than 8 {mu}m min{sup -1} have been realized to replace previous methods such as wet etching. This is also the case for printer applications. Specialized applications that require etching down to pyrex or oxide often result in the loss of feature size control at the interface; this is an industry wide problem. STS have developed a technique to address this. The rapid progression of the industry has led to development of the STS ICP etch tool, as well as the process. (author)

  5. Micromachining on copper and nickel by electrochemical wet stamping

    International Nuclear Information System (INIS)

    The fabrication of microstructures on copper and nickel has been achieved by an approach named electrochemical wet stamping (E-WETS). The E-WETS process allows the direct imprinting of microscopic reliefs on an agarose stamp into nickel and copper through a selective anodic dissolution process. The pre-patterned agarose with a high gel strength that has been soaked in a desired etching solution is employed as a stamp. It can direct and supply the solution preferentially on the contact area owing to the constant supply of electrolyte from the agarose stamp to the interface and then the electrochemical reaction is limited only to the contact area. Simultaneously, the product can be removed from the gel/substrate interface. On the basis of the electrochemical behavior of the copper electrode in contact with the agarose full of 0.1 M HClO4, the potential for the electrochemical micromachining was chosen to be a relatively low value, 0.4 V versus SCE, to prevent the generation of cuprous oxide. A voltage pulse was applied to the electrochemical machining of nickel. The pulse amplitude was set to 8 V versus SCE to take the electrode into the transpassivation region rather than the passivation region in the pulse duration. Furthermore, the different electrochemical mechanisms involved in the etching process have been discussed in detail

  6. [Micromachining of Au film by femtosecond pulse laser].

    Science.gov (United States)

    Yuan, Dong-qing; Zhou, Ming; Cai, Lan; Shen, Jian

    2009-05-01

    Femtosecond laser micromachining of film is an emerging technology for fabrication of MEMS devices. A Ti: sapphire laser (130 fs, 1000 Hz)was used to irradiate the thin film with variations in process parameters such as pulse energy. The film thickness is about 4 microm which was measured by AFM. When we used single pulse to excite the film, the ablation diameter increased along with the energy ascending; when the energy of single pulse was invariable, the diameter had little change when altering the number of pulses. The single pulse threshold fluence of Au film was Fth = 0.7 J x cm(-2) at this ultrashort pulse-length in air. By changing the energy of excitation pulse it was found that when the energy was lower than the threshold, the line on the film was heaved; when the energy was higher than the threshold, the line was concave, which was detected by AFM. It was also found that the width of line decreased along with the increase in process speed when the pulse energy remained unchanged; the width of line increased along with the pulse energy ascending when the process speed was fixed. PMID:19650455

  7. Silicon micromachining using a high-density plasma source

    International Nuclear Information System (INIS)

    Dry etching of Si is critical in satisfying the demands of the micromachining industry. The micro-electro-mechanical systems (MEMS) community requires etches capable of high aspect ratios, vertical profiles, good feature size control and etch uniformity along with high throughput to satisfy production requirements. Surface technology systems' (STS's) high-density inductively coupled plasma (ICP) etch tool enables a wide range of applications to be realized whilst optimizing the above parameters. Components manufactured from Si using an STS ICP include accelerometers and gyroscopes for military, automotive and domestic applications. STS's advanced silicon etch (ASETM) has also allowed the first generation of MEMS-based optical switches and attenuators to reach the marketplace. In addition, a specialized application for fabricating the next generation photolithography exposure masks has been optimized for 200 mm diameter wafers, to depths of ∼750 μm. Where the profile is not critical, etch rates of greater than 8 μm min-1 have been realized to replace previous methods such as wet etching. This is also the case for printer applications. Specialized applications that require etching down to pyrex or oxide often result in the loss of feature size control at the interface; this is an industry wide problem. STS have developed a technique to address this. The rapid progression of the industry has led to development of the STS ICP etch tool, as well as the process. (author)

  8. Design and fabrication of nanofluidic devices by surface micromachining.

    Science.gov (United States)

    Han, Anpan; de Rooij, Nicolaas F; Staufer, Urs

    2006-05-28

    Using surface micromachining technology, we fabricated nanofluidic devices with channels down to 10 nm deep, 200 nm wide and up to 8 cm long. We demonstrated that different materials, such as silicon nitride, polysilicon and silicon dioxide, combined with variations of the fabrication procedure, could be used to make channels both on silicon and glass substrates. Critical channel design parameters were also examined. With the channels as the basis, we integrated equivalent elements which are found on micro total analysis (μTAS) chips for electrokinetic separations. On-chip platinum electrodes enabled electrokinetic liquid actuation. Micro-moulded polydimethylsiloxane (PDMS) structures bonded to the devices served as liquid reservoirs for buffers and sample. Ionic conductance measurements showed Ohmic behaviour at ion concentrations above 10 mM, and surface charge governed ion transport below 5 mM. Low device to device conductance variation (1%) indicated excellent channel uniformity on the wafer level. As proof of concept, we demonstrated electrokinetic injections using an injection cross with volume below 50 attolitres (10(-18) l). PMID:21727495

  9. Laser micromachining of oxygen reduced graphene-oxide films

    Science.gov (United States)

    Sinar, Dogan; Knopf, George K.; Nikumb, Suwas; Andrushchenko, Anatoly

    2014-03-01

    Non-conductive graphene-oxide (GO) inks can be synthesized from inexpensive graphite powders and deposited on functionalized flexible substrates using inkjet printing technology. Once deposited, the electrical conductivity of the GO film can be restored through laser assisted thermal reduction. Unfortunately, the inkjet nozzle diameter (~40μm) places a limit on the printed feature size. In contrast, a tightly focused femtosecond pulsed laser can create precise micro features with dimensions in the order of 2 to 3 μm. The smallest feature size produced by laser microfabrication is a function of the laser beam diameter, power level, feed rate, material characteristics and spatial resolution of the micropositioning system. Laser micromachining can also remove excess GO film material adjacent to the electrode traces and passive electronic components. Excess material removal is essential for creating stable oxygen-reduced graphene-oxide (rGO) printed circuits because electron buildup along the feature edges will alter the conductivity of the non-functional film. A study on the impact of laser ablation on the GO film and the substrate are performed using a 775nm, 120fs pulsed laser. The average laser power was 25mW at a spot size of ~ 5μm, and the feed rate was 1000-1500mm/min. Several simple microtraces were fabricated and characterized in terms of electrical resistance and surface topology.

  10. Femtosecond laser micromachining of fibre Bragg gratings for simultaneous measurement of temperature and concentration of liquids

    International Nuclear Information System (INIS)

    This paper is concerned with micromachining of optical fibre Bragg gratings (FBGs) using a femtosecond pulsed laser. The purpose of this work is to increase the sensitivity of FBGs for simultaneous monitoring of the concentration of chemicals and biological liquids and their temperature. A Ti : sapphire regenerative amplifier was utilized to inscribe micro-grooves with widths of 16 and 22 μm in the cladding of the optical fibres. Due to the core-confined light propagation characteristics of FBGs, their sensitivity to the changes in the index of refraction of the surrounding medium is minimal. However, by creating micro-grooves in the cladding layer, the index of refraction of the surrounding medium becomes effective in the coupling of the propagating core modes. As the index of refraction of liquids depends on the composition and concentration, the FBG with micromachined cladding can provide enough sensitivity to be used in chemical sensing. The performance of the micromachined FBGs was investigated by immersing them in different liquid solutions of polyvinyl butyral (PVB) in ethanol and obtaining their thermal responses. Results showed that the optical response of the micromachined FBGs (i.e. red shift in Bragg wavelength) is different by up to 10% in PVB solutions in ethanol than in ethanol alone. The micromachined FBGs can be used to monitor the concentration as well as the temperature of a solution

  11. Femtosecond laser micromachining of fibre Bragg gratings for simultaneous measurement of temperature and concentration of liquids

    Energy Technology Data Exchange (ETDEWEB)

    Alemohammad, H; Toyserkani, E [Department of Mechanical and Mechatronics Engineering, University of Waterloo, ON N2L 3G1 (Canada); Pinkerton, A J [School of Mechanical, Aerospace and Civil Engineering, University of Manchester, PO Box 88, Manchester, M60 1QD (United Kingdom)], E-mail: etoyserk@uwaterloo.ca, E-mail: shalemoh@uwaterloo.ca, E-mail: andrew.pinkerton@manchester.ac.uk

    2008-09-21

    This paper is concerned with micromachining of optical fibre Bragg gratings (FBGs) using a femtosecond pulsed laser. The purpose of this work is to increase the sensitivity of FBGs for simultaneous monitoring of the concentration of chemicals and biological liquids and their temperature. A Ti : sapphire regenerative amplifier was utilized to inscribe micro-grooves with widths of 16 and 22 {mu}m in the cladding of the optical fibres. Due to the core-confined light propagation characteristics of FBGs, their sensitivity to the changes in the index of refraction of the surrounding medium is minimal. However, by creating micro-grooves in the cladding layer, the index of refraction of the surrounding medium becomes effective in the coupling of the propagating core modes. As the index of refraction of liquids depends on the composition and concentration, the FBG with micromachined cladding can provide enough sensitivity to be used in chemical sensing. The performance of the micromachined FBGs was investigated by immersing them in different liquid solutions of polyvinyl butyral (PVB) in ethanol and obtaining their thermal responses. Results showed that the optical response of the micromachined FBGs (i.e. red shift in Bragg wavelength) is different by up to 10% in PVB solutions in ethanol than in ethanol alone. The micromachined FBGs can be used to monitor the concentration as well as the temperature of a solution.

  12. Effect of astaxanthin on human sperm capacitation.

    Science.gov (United States)

    Donà, Gabriella; Kožuh, Ivana; Brunati, Anna Maria; Andrisani, Alessandra; Ambrosini, Guido; Bonanni, Guglielmo; Ragazzi, Eugenio; Armanini, Decio; Clari, Giulio; Bordin, Luciana

    2013-06-01

    In order to be able to fertilize oocytes, human sperm must undergo a series of morphological and structural alterations, known as capacitation. It has been shown that the production of endogenous sperm reactive oxygen species (ROS) plays a key role in causing cells to undergo a massive acrosome reaction (AR). Astaxanthin (Asta), a photo-protective red pigment belonging to the carotenoid family, is recognized as having anti-oxidant, anti-cancer, anti-diabetic and anti-inflammatory properties and is present in many dietary supplements. This study evaluates the effect of Asta in a capacitating buffer which induces low ROS production and low percentages of acrosome-reacted cells (ARC). Sperm cells were incubated in the presence or absence of increasing concentrations of Asta or diamide (Diam) and analyzed for their ROS production, Tyr-phosphorylation (Tyr-P) pattern and percentages of ARC and non-viable cells (NVC). Results show that Asta ameliorated both sperm head Tyr-P and ARC values without affecting the ROS generation curve, whereas Diam succeeded in enhancing the Tyr-P level but only of the flagellum without increasing ARC values. It is suggested that Asta can be inserted in the membrane and therefore create capacitation-like membrane alteration which allow Tyr-P of the head. Once this has occurred, AR can take place and involves a higher numbers of cells. PMID:23736766

  13. Effect of Astaxanthin on Human Sperm Capacitation

    Directory of Open Access Journals (Sweden)

    Luciana Bordin

    2013-06-01

    Full Text Available In order to be able to fertilize oocytes, human sperm must undergo a series of morphological and structural alterations, known as capacitation. It has been shown that the production of endogenous sperm reactive oxygen species (ROS plays a key role in causing cells to undergo a massive acrosome reaction (AR. Astaxanthin (Asta, a photo-protective red pigment belonging to the carotenoid family, is recognized as having anti-oxidant, anti-cancer, anti-diabetic and anti-inflammatory properties and is present in many dietary supplements. This study evaluates the effect of Asta in a capacitating buffer which induces low ROS production and low percentages of acrosome-reacted cells (ARC. Sperm cells were incubated in the presence or absence of increasing concentrations of Asta or diamide (Diam and analyzed for their ROS production, Tyr-phosphorylation (Tyr-P pattern and percentages of ARC and non-viable cells (NVC. Results show that Asta ameliorated both sperm head Tyr-P and ARC values without affecting the ROS generation curve, whereas Diam succeeded in enhancing the Tyr-P level but only of the flagellum without increasing ARC values. It is suggested that Asta can be inserted in the membrane and therefore create capacitation-like membrane alteration which allow Tyr-P of the head. Once this has occurred, AR can take place and involves a higher numbers of cells.

  14. Capacitive Structures for Gas and Biological Sensing

    KAUST Repository

    Sapsanis, Christos

    2015-04-01

    The semiconductor industry was benefited by the advances in technology in the last decades. This fact has an impact on the sensors field, where the simple transducer was evolved into smart miniaturized multi-functional microsystems. However, commercially available gas and biological sensors are mostly bulky, expensive, and power-hungry, which act as obstacles to mass use. The aim of this work is gas and biological sensing using capacitive structures. Capacitive sensors were selected due to its design simplicity, low fabrication cost, and no DC power consumption. In the first part, the dominant structure among interdigitated electrodes (IDEs), fractal curves (Peano and Hilbert) and Archimedean spiral was investigated from capacitance density perspective. The investigation consists of geometrical formula calculations, COMSOL Multiphysics simulations and cleanroom fabrication of the capacitors on a silicon substrate. Moreover, low-cost fabrication on flexible plastic PET substrate was conducted outside cleanroom with rapid prototyping using a maskless laser etching. The second part contains the humidity, Volatile Organic compounds (VOCs) and Ammonia sensing of polymers, Polyimide and Nafion, and metal-organic framework (MOF), Cu(bdc)2.xH2O using IDEs and tested in an automated gas setup for experiment control and data extraction. The last part includes the biological sensing of C - reactive protein (CRP) quantification, which is considered as a biomarker of being prone to cardiac diseases and Bovine serum albumin (BSA) protein quantification, which is used as a reference for quantifying unknown proteins.

  15. Multi-Channel Capacitive Sensor Arrays.

    Science.gov (United States)

    Wang, Bingnan; Long, Jiang; Teo, Koon Hoo

    2016-01-01

    In this paper, multi-channel capacitive sensor arrays based on microstrip band-stop filters are studied. The sensor arrays can be used to detect the proximity of objects at different positions and directions. Each capacitive sensing structure in the array is connected to an inductive element to form resonance at different frequencies. The resonances are designed to be isolated in the frequency spectrum, such that the change in one channel does not affect resonances at other channels. The inductive element associated with each capacitive sensor can be surface-mounted inductors, integrated microstrip inductors or metamaterial-inspired structures. We show that by using metamaterial split-ring structures coupled to a microstrip line, the quality factor of each resonance can be greatly improved compared to conventional surface-mounted or microstrip meander inductors. With such a microstrip-coupled split-ring design, more sensing elements can be integrated in the same frequency spectrum, and the sensitivity can be greatly improved. PMID:26821023

  16. Ultrasonic resonant piezoelectric actuator with intrinsic torque measurement.

    Science.gov (United States)

    Pott, Peter P; Matich, Sebastian; Schlaak, Helmut F

    2012-11-01

    Piezoelectric ultrasonic actuators are widely used in small-scale actuation systems, in which a closed-loop position control is usually utilized. To save an additional torque sensor, the intrinsic measurement capabilities of the piezoelectric material can be employed. To prove feasibility, a motor setup with clearly separated actuation for the friction and driving forces is chosen. The motor concept is based on resonant ultrasonic vibrations. To assess the effects of the direct piezoelectric effect, a capacitance bridge-type circuit has been selected. Signal processing is done by a measurement card with an integrated field-programmable gate array. The motor is used to drive a winch, and different torques are applied by means of weights to be lifted. Assessing the bridge voltage, a good proportionality to the applied torque of 1.47 mV/mN·m is shown. A hysteresis of 1% has been determined. The chosen motor concept is useful for intrinsic torque measurement. However, it provides drawbacks in terms of limited mechanical performance, wear, and thermal losses because of the soft piezoelectric material. Future work will comprise the application of the method to commercially available piezoelectric actuators as well as the implementation of the measurement circuit in an embedded system. PMID:23192814

  17. MEMS ultrasonic transducer for monitoring of steel structures

    Science.gov (United States)

    Jain, Akash; Greve, David W.; Oppenheim, Irving J.

    2002-06-01

    Ultrasonic methods can be used to monitor crack propagation, weld failure, or section loss at critical locations in steel structures. However, ultrasonic inspection requires a skilled technician, and most commonly the signal obtained at any inspection is not preserved for later use. A preferred technology would use a MEMS device permanently installed at a critical location, polled remotely, and capable of on-chip signal processing using a signal history. We review questions related to wave geometry, signal levels, flaw localization, and electromechanical design issues for microscale transducers, and then describe the design, characterization, and initial testing of a MEMS transducer to function as a detector array. The device is approximately 1-cm square and was fabricated by the MUMPS process. The chip has 23 sensor elements to function in a phased array geometry, each element containing 180 hexagonal polysilicon diaphragms with a typical leg length of 49 microns and an unloaded natural frequency near 3.5 MHz. We first report characterization studies including capacitance-voltage measurements and admittance measurements, and then report initial experiments using a conventional piezoelectric transducer for excitation, with successful detection of signals in an on-axis transmission experiment and successful source localization from phased array performance in an off-axis transmission experiment.

  18. Distributed Capacitive Sensor for Sample Mass Measurement

    Science.gov (United States)

    Toda, Risaku; McKinney, Colin; Jackson, Shannon P.; Mojarradi, Mohammad; Manohara, Harish; Trebi-Ollennu, Ashitey

    2011-01-01

    Previous robotic sample return missions lacked in situ sample verification/ quantity measurement instruments. Therefore, the outcome of the mission remained unclear until spacecraft return. In situ sample verification systems such as this Distributed Capacitive (DisC) sensor would enable an unmanned spacecraft system to re-attempt the sample acquisition procedures until the capture of desired sample quantity is positively confirmed, thereby maximizing the prospect for scientific reward. The DisC device contains a 10-cm-diameter pressure-sensitive elastic membrane placed at the bottom of a sample canister. The membrane deforms under the weight of accumulating planetary sample. The membrane is positioned in close proximity to an opposing rigid substrate with a narrow gap. The deformation of the membrane makes the gap narrower, resulting in increased capacitance between the two parallel plates (elastic membrane and rigid substrate). C-V conversion circuits on a nearby PCB (printed circuit board) provide capacitance readout via LVDS (low-voltage differential signaling) interface. The capacitance method was chosen over other potential approaches such as the piezoelectric method because of its inherent temperature stability advantage. A reference capacitor and temperature sensor are embedded in the system to compensate for temperature effects. The pressure-sensitive membranes are aluminum 6061, stainless steel (SUS) 403, and metal-coated polyimide plates. The thicknesses of these membranes range from 250 to 500 m. The rigid substrate is made with a 1- to 2-mm-thick wafer of one of the following materials depending on the application requirements glass, silicon, polyimide, PCB substrate. The glass substrate is fabricated by a microelectromechanical systems (MEMS) fabrication approach. Several concentric electrode patterns are printed on the substrate. The initial gap between the two plates, 100 m, is defined by a silicon spacer ring that is anodically bonded to the glass

  19. Comparative study of electrochemical capacitance of multi-walled carbon nanotubes before and after chopping

    International Nuclear Information System (INIS)

    In the work, short multi-walled carbon nanotubes (S-CNTs) were synthesized by chopping conventional μm-long multi-walled carbon nanotubes (L-CNTs) under ultrasonication in H2SO4/HNO3 mixed acids. A comparative electrochemical investigation performed in 6 M KOH solution demonstrated that a specific capacitance (SC) of ca. 14.6 μF cm-2 was delivered by the S-CNTs with the specific surface area (SSA) of 207 m2 g-1, much larger than that of ca. 10.1 μF cm-2 for the L-CNTs with the SSA of 223 m2 g-1, the reason for which was that S-CNTs with two open ends, due to good ion penetrability, provided more entrances for electrolyte ions to access the inner surface easily through their shorter inner pathway so as to enhance their SSA utilization and geometric SC. The surface structure disruption of S-CNTs, owing to ultrasonication and oxidation during chopping process, deteriorated their electronic conductivity and resulted in an inferior power property in contrast to L-CNTs.

  20. Intramembrane Cavitation as a Predictive Bio-Piezoelectric Mechanism for Ultrasonic Brain Stimulation

    Science.gov (United States)

    Plaksin, Michael; Shoham, Shy; Kimmel, Eitan

    2014-01-01

    Low-intensity ultrasonic waves can remotely and nondestructively excite central nervous system (CNS) neurons. While diverse applications for this effect are already emerging, the biophysical transduction mechanism underlying this excitation remains unclear. Recently, we suggested that ultrasound-induced intramembrane cavitation within the bilayer membrane could underlie the biomechanics of a range of observed acoustic bioeffects. In this paper, we show that, in CNS neurons, ultrasound-induced cavitation of these nanometric bilayer sonophores can induce a complex mechanoelectrical interplay leading to excitation, primarily through the effect of currents induced by membrane capacitance changes. Our model explains the basic features of CNS acoustostimulation and predicts how the experimentally observed efficacy of mouse motor cortical ultrasonic stimulation depends on stimulation parameters. These results support the hypothesis that neuronal intramembrane piezoelectricity underlies ultrasound-induced neurostimulation, and suggest that other interactions between the nervous system and pressure waves or perturbations could be explained by this new mode of biological piezoelectric transduction.

  1. Improved capacitance sensor with variable operating frequency for scanning capacitance microscopy

    Energy Technology Data Exchange (ETDEWEB)

    Kwon, Joonhyung [PSIA Corporation, Induspia 5F, Sang-Daewon-Dong 517-13, Sungnam 462-120 (Korea, Republic of); Kim, Joonhui [PSIA Corporation, Induspia 5F, Sang-Daewon-Dong 517-13, Sungnam 462-120 (Korea, Republic of); Jeong, Jong-Hwa [PSIA Corporation, Induspia 5F, Sang-Daewon-Dong 517-13, Sungnam 462-120 (Korea, Republic of); Lee, Euy-Kyu [Department of Physics, Myongji University, Yongin, Kyunggido 449-728 (Korea, Republic of); Seok Kim, Yong [PSIA Corporation, Induspia 5F, Sang-Daewon-Dong 517-13, Sungnam 462-120 (Korea, Republic of); Kang, Chi Jung [Department of Physics, Myongji University, Yongin, Kyunggido 449-728 (Korea, Republic of); Park, Sang-il [PSIA Corporation, Induspia 5F, Sang-Daewon-Dong 517-13, Sungnam 462-120 (Korea, Republic of)]. E-mail: park@psia.co.kr

    2005-11-15

    Scanning capacitance microscopy (SCM) has been gaining attention for its capability to measure local electrical properties in doping profile, oxide thickness, trapped charges and charge dynamics. In many cases, stray capacitance produced by different samples and measurement conditions affects the resonance frequency of a capacitance sensor. The applications of conventional SCM are critically limited by the fixed operating frequency and lack of tunability in its SCM sensor. In order to widen SCM application to various samples, we have developed a novel SCM sensor with variable operating frequency. By performing variable frequency sweep over the band of 160 MHz, the SCM sensor is tuned to select the best and optimized resonance frequency and quality factor for each sample measurement. The fundamental advantage of the new variable frequency SCM sensor was demonstrated in the SCM imaging of silicon oxide nano-crystals. Typical sensitivity of the variable frequency SCM sensor was found to be 10{sup -19} F/V.

  2. Improved capacitance sensor with variable operating frequency for scanning capacitance microscopy

    International Nuclear Information System (INIS)

    Scanning capacitance microscopy (SCM) has been gaining attention for its capability to measure local electrical properties in doping profile, oxide thickness, trapped charges and charge dynamics. In many cases, stray capacitance produced by different samples and measurement conditions affects the resonance frequency of a capacitance sensor. The applications of conventional SCM are critically limited by the fixed operating frequency and lack of tunability in its SCM sensor. In order to widen SCM application to various samples, we have developed a novel SCM sensor with variable operating frequency. By performing variable frequency sweep over the band of 160 MHz, the SCM sensor is tuned to select the best and optimized resonance frequency and quality factor for each sample measurement. The fundamental advantage of the new variable frequency SCM sensor was demonstrated in the SCM imaging of silicon oxide nano-crystals. Typical sensitivity of the variable frequency SCM sensor was found to be 10-19 F/V

  3. Ultrasonic Testing of Metallic Uranium

    International Nuclear Information System (INIS)

    The development of ultrasonic testing and the results of routine inspection on cast billets and rolled rods for JRR-3 fuel-elements are described. The reactor is a domestic made, heavy-water-moderated and cooled, research reactor of 10 MW capacity, with aluminium clad metallic uranium fuel-elements. Cast billets of 3-in diam. were rolled to rods of 1-in diam. Ultrasonic testing was applied for detecting internal voids and cracks and for evaluating random orientation and grain size after heat treatment. The ultrasonic testing of uranium was very difficult because of its high acoustic impedance, and the high sensitivity of the transducers and special beam mask were necessary for the water-immersed transmission method. A set of brass billets with artificial defects was used as the standard. During the development of these standards, several kinds of Cu-Zn alloy were examined for their acoustic properties. Any internal defects greater than 2 mm and 0.5 mm equivalent diameter were rejected in the case of billets and rolled rods respectively. Two billets which included typical voids were rolled to size, and ultrasonic testing and radiography with Betatron were carried out at several stages to find the behaviour of the voids during fabrication. The attenuation of ultrasonic waves is affected by the grain size, and is particularly large if the ultrasonic wave-length is comparable to the grain size.- This was used for the detection of unsatisfactory heat treatment. The ultrasonic wave-speed is different in the parallel and perpendicular rolling directions in as-rolled state. This difference decreased as the temperature of heat treatment is increased; however, a small difference was observed in a beta-quenched specimen, and real acoustic isotropy was obtained by gamma-quenching. (author)

  4. Evaluation of multiple-channel OFDM based airborne ultrasonic communications.

    Science.gov (United States)

    Jiang, Wentao; Wright, William M D

    2016-09-01

    Orthogonal frequency division multiplexing (OFDM) modulation has been extensively used in both wired and wireless communication systems. The use of OFDM technology allows very high spectral efficiency data transmission without using complex equalizers to correct the effect of a frequency-selective channel. This work investigated OFDM methods in an airborne ultrasonic communication system, using commercially available capacitive ultrasonic transducers operating at 50kHz to transmit information through the air. Conventional modulation schemes such as binary phase shift keying (BPSK) and quadrature amplitude modulation (QAM) were used to modulate sub-carrier signals, and the performances were evaluated in an indoor laboratory environment. Line-of-sight (LOS) transmission range up to 11m with no measurable errors was achieved using BPSK at a data rate of 45kb/s and a spectral efficiency of 1b/s/Hz. By implementing a higher order modulation scheme (16-QAM), the system data transfer rate was increased to 180kb/s with a spectral efficiency of 4b/s/Hz at attainable transmission distances up to 6m. Diffraction effects were incorporated into a model of the ultrasonic channel that also accounted for beam spread and attenuation in air. The simulations were a good match to the measured signals and non-LOS signals could be demodulated successfully. The effects of multipath interference were also studied in this work. By adding cyclic prefix (CP) to the OFDM symbols, the bit error rate (BER) performance was significantly improved in a multipath environment. PMID:27365316

  5. THE SURFACE EFFECT ON THE TENSILE STRENGTH OF MICROMACHINED POLYSILICON FILMS FOR MEMS

    Institute of Scientific and Technical Information of China (English)

    Ding Jianning; Yang Jichang; Wen Shizhu

    2005-01-01

    In order to accomplish reliable mechanical design of MEMS, the influences of surface roughness and octadecyltrichlorosilane (OTS) self-assembled monolayers (SAMs) on the mechanical properties of micromachined polysilicon films for MEMS are investigated. Surface effect on the fracture properties of micromachined polysilicon films is evaluated with a new microtensile testing method using a magnet-coil force actuator. Statistical analysis of the surface roughness effects on the tensile strength predicated the surface roughness characterization of polysilicon films being tested and the direct relation of the mechanical properties with the surface roughness features. The fracture strength decreases with the increase of the surface roughness. The octadecyltrichlorosilane self-assembled monolayers coating leads to an increase of the average fracture strength up to 32.46%. Surface roughness and the hydrophobic properties of specimen when coated with OTS films are the two main factors influencing the tensile strength of micromachined polysilicon films for MEMS.

  6. Bulk micromachined energy harvesters employing (K, Na)NbO3 thin film

    International Nuclear Information System (INIS)

    In this paper, a micromachined energy harvester employing a lead-free (K, Na)NbO3 (KNN) thin film was reported. KNN is one of the lead-free piezoelectric materials. It is a promising alternative to Pb(Zr, Ti)O3 (PZT). In a micromachined energy harvester, a 2 µm thick KNN film was deposited on a silicon cantilever integrated with a proof mass. The energy harvester achieved an output power of 731 nW and a normalized power density (NPD) of 2.29 μW (g−2 mm−3) at the resonant frequency of 1509 Hz with the acceleration of 10 m s−2. The harvested energy was enhanced considerably by applying bulk micromachining, and was comparable to the PZT-based energy harvesters. (paper)

  7. Analysis of the Micromachining Process of Dielectric and Metallic Substrates Immersed in Water with Femtosecond Pulses

    Directory of Open Access Journals (Sweden)

    Simas Butkus

    2015-12-01

    Full Text Available Micromachining of 1 mm thick dielectric and metallic substrates was conducted using femtosecond pulse generated filaments in water. Several hundred microjoule energy pulses were focused within a water layer covering the samples. Within this water layer, non-linear self-action mechanisms transform the beam, which enables higher quality and throughput micromachining results compared to focusing in air. Evidence of beam transformation into multiple light filaments is presented along with theoretical modeling results. In addition, multiparametric optimization of the fabrication process was performed using statistical methods and certain acquired dependencies are further explained and tested using laser shadowgraphy. We demonstrate that this micromachining process exhibits complicated dynamics within the water layer, which are influenced by the chosen parameters.

  8. First reliability test of a surface micromachined microengine using SHiMMeR

    Energy Technology Data Exchange (ETDEWEB)

    Tanner, D.M.; Smith, N.F.; Bowman, D.J. [and others

    1997-08-01

    The first-ever reliability stress test on surface micromachined microengines developed at Sandia National Laboratories (SNL) has been completed. We stressed 41 microengines at 36,000 RPM and inspected the functionality at 60 RPM. We have observed an infant mortality region, a region of low failure rate (useful life), and no signs of wearout in the data. The reliability data are presented and interpreted using standard reliability methods. Failure analysis results on the stressed microengines are presented. In our effort to study the reliability of MEMS, we need to observe the failures of large numbers of parts to determine the failure modes. To facilitate testing of large numbers of micromachines. The Sandia High Volume Measurement of Micromachine Reliability (SHiMMeR) system has computer controlled positioning and the capability to inspect moving parts. The development of this parallel testing system is discussed in detail.

  9. Calibration and validation of ultrasonic reflection methods for thin-film measurement in tribology

    International Nuclear Information System (INIS)

    Interfacial thin liquid films between solid bodies have been measured using ultrasonic reflective techniques in a range of tribological applications such as those present in hydrodynamic bearings, piston rings and mechanical seals (Dwyer-Joyce et al (2004) Tribol. Lett. 17 337–48, Dwyer-Joyce et al (2006) Proc. Instn Mech. Eng. A 220 619–28, Reddyhoff et al (2006) Tribol. Trans. 51 140–49, Harper et al (2005) Tribol. Interface Eng. Ser. 48 305–12). There are two main ultrasonic methods used, the spring model and film resonance techniques. For very thin films (<20 µm) a simple quasi-static spring model has been used to show that the proportion of the wave reflected by the liquid layer depends on the stiffness of the layer. This stiffness can be related to the layer thickness and its material properties. In the film resonance technique the incident ultrasonic wave is used to resonate the liquid layer. The frequency of resonance can then be related to the layer thickness. This paper collates four experiments where oil film thickness is measured by both ultrasonic reflection and an independent method. In the first three experiments the film thickness is measured ultrasonically and this measurement is compared to the thickness inferred from the geometry of the surfaces constraining the liquid film. In the final experiment the ultrasonic results are compared to measurements taken using capacitive and verified laser interferometer techniques. Excellent correlation was observed between the measurement methods in all of the experiments. In particular the film resonance technique showed repeatable and consistent results across a wide range of film thicknesses. The spring model showed a degree of agreement for films above a few microns but this relationship diverged as the film thickness approached the magnitude of the surface roughness. (paper)

  10. Ultrasonic measurements and technologies

    CERN Document Server

    Kočiš, Štefan

    1996-01-01

    An impulse for writing this book has originated from the effort to sum­ marize and publicise the acquired results of a research team at the De­ partment of Automation of the Faculty of Electrical Engineering and In­ formatics, Slovak Technical University in Bratislava. The research team has been involved for a long time with control problems for machine production mechanisms and, in recent (approximately 15) years, its effort was aimed mostly at the control of electrical servosystems of robots. Within this scope, the members of the authors' staff solved the State Re­ search Task Ultrasonic sensing of the position of a robot hand, which was coordinated by the Institute of Technical Cybernetics of the Slovak Academy of Sciences in Bratislava. The problem was solved in a complex way, i.e. from a conceptual de­ sign of the measurement, through the measurement and evaluation sys­ tem, up to connection to the control system of a robot. Compensation of the atmospheric influence on the precision of measurement,...

  11. [Ultrasonics in endodontics: mechanism of action].

    Science.gov (United States)

    Pacheco Plaza, M C; Kessler Nieto, F; Orts Rodríguez, M T; Ruiz de Temiño Malo, P

    1989-01-01

    The present study, first of three dwelling with ultrasonics in endodontic therapy, is a review of the literature about mechanisms involved and appliance of some of the sonic and ultrasonic system. PMID:2700391

  12. A study on Pc- based ultrasonic testing system using intelligent ultrasonic flaw classification software

    International Nuclear Information System (INIS)

    For convenient application of ultrasonic pattern recognition approaches in practical field inspection of weldments, we have developed an intelligent ultrasonic flaw classification system by the novel combination of two ingredients; 1) a PC-based ultrasonic testing system, and 2) an intelligent ultrasonic flaw classification software with an invariant ultrasonic pattern recognition algorithm. Here, key aspects of this intelligent system are addressed including the Pc-based ultrasonic testing system, enhancement of the performance by use of newly proposed ultrasonic features, and feature selection.

  13. Study of ultrasonic thermometry based on ultrasonic time-of-flight measurement

    Directory of Open Access Journals (Sweden)

    Ruixi Jia

    2016-03-01

    Full Text Available Ultrasonic thermometry is a kind of acoustic pyrometry and it has been evolving as a new temperature measurement technology for various environment. However, the accurate measurement of the ultrasonic time-of-flight is the key for ultrasonic thermometry. In this paper, we study the ultrasonic thermometry technique based on ultrasonic time-of-flight measurement with a pair of ultrasonic transducers for transmitting and receiving signal. The ultrasonic transducers are installed in a single path which ultrasonic travels. In order to validate the performance of ultrasonic thermometry, we make a contrast about the absolute error between the measured temperature value and the practical one. With and without heater source, the experimental results indicate ultrasonic thermometry has high precision of temperature measurement.

  14. Study of ultrasonic thermometry based on ultrasonic time-of-flight measurement

    Science.gov (United States)

    Jia, Ruixi; Xiong, Qingyu; Wang, Lijie; Wang, Kai; Shen, Xuehua; Liang, Shan; Shi, Xin

    2016-03-01

    Ultrasonic thermometry is a kind of acoustic pyrometry and it has been evolving as a new temperature measurement technology for various environment. However, the accurate measurement of the ultrasonic time-of-flight is the key for ultrasonic thermometry. In this paper, we study the ultrasonic thermometry technique based on ultrasonic time-of-flight measurement with a pair of ultrasonic transducers for transmitting and receiving signal. The ultrasonic transducers are installed in a single path which ultrasonic travels. In order to validate the performance of ultrasonic thermometry, we make a contrast about the absolute error between the measured temperature value and the practical one. With and without heater source, the experimental results indicate ultrasonic thermometry has high precision of temperature measurement.

  15. DESIGN, FABRICATION, TESTING AND MECHANICAL ANALYSIS OF BULK-MICROMACHINED FLOWMETERS

    Institute of Scientific and Technical Information of China (English)

    Wang Xiaobao; Qian Jin; Zhang Dacheng

    2004-01-01

    Micromachined piezoresistive flowmeters with four different types of sensing structures have been designed, fabricated and tested. Piezoresistors were defined at the end of the sensors through p-diffusion, and their values were about 3.5 kΩ. Wheatstone bridge was configured with the piezoresistors in order to measure the output response. The output voltage increases with increasing flow rate of air, obeying determined relationships. The testing results show that the sensors that are designed for measuring 10L/M in full operational range have desired sensitivities. The sensor chip is manufactured with bulk-micromachining technologies, requiring a set of seven masks.

  16. Sample preparation by focused ion beam micromachining for transmission electron microscopy imaging in front-view.

    Science.gov (United States)

    Jublot, Michael; Texier, Michael

    2014-01-01

    This article deals with the development of an original sample preparation method for transmission electron microscopy (TEM) using focused ion beam (FIB) micromachining. The described method rests on the use of a removable protective shield to prevent the damaging of the sample surface during the FIB lamellae micromachining. It enables the production of thin TEM specimens that are suitable for plan view TEM imaging and analysis of the sample surface, without the deposition of a capping layer. This method is applied to an indented silicon carbide sample for which TEM analyses are presented to illustrate the potentiality of this sample preparation method. PMID:24200984

  17. Note: femtosecond laser micromachining of straight and linearly tapered capillary discharge waveguides.

    Science.gov (United States)

    Wiggins, S M; Reijnders, M P; Abuazoum, S; Hart, K; Welsh, G H; Issac, R C; Jones, D R; Jaroszynski, D A

    2011-09-01

    Gas-filled capillary discharge waveguides are important structures in laser-plasma interaction applications, such as the laser wakefield accelerator. We present the methodology for applying femtosecond laser micromachining in the production of capillary channels (typically 200-300 μm in diameter and 30-40 mm in length), including the formalism for capillaries with a linearly tapered diameter. The latter is demonstrated to possess a smooth variation in diameter along the length of the capillary (tunable with the micromachining trajectories). This would lead to a longitudinal plasma density gradient in the waveguide that may dramatically improve the laser-plasma interaction efficiency in applications. PMID:21974631

  18. Proton beam micromachining on strippable aqueous base developable negative resist

    International Nuclear Information System (INIS)

    Complete text of publication follows. Proton Beam Micromachining (PBM, also known as P-beam writing), a novel direct- write process for the production of 3D microstructures, can be used to make multilevel structures in a single layer of resist by varying the ion energy. The interaction between the bombarding ions and the target material is mainly ionization, and very few ions suffer high angle nuclear collisions, therefore structures made with PBM have smooth near vertical side walls. The most commony applied resists in PBM are the positive, conventional, polymethyl methacrylate (PMMA); and the negative, chemically amplified, SU-8 (Micro Chem Corp). SU-8 is an epoxy based resist suitable also for LIGA and UV-LIGA processes, it offers good sensitivity, good process latitude, very high aspect ratio and therefore it dominates in the high aspect ratio micromachining applications. SU-8 requires 30 nC/mm2 fluence for PBM irradiations at 2 MeV protons. Its crosslinking chemistry is based on the eight epoxy rings in the polymer chain, which provide a very dense three dimensional network in the presence of suitably activated photo acid generators (PAGs) which is very difficult to be stripped away after development. Thus, stripping has to be assisted with plasma processes or with special liquid removers. Moreover, the SU-8 developer is organic, propylene glycol methyl ether acetate (PGMEA), and thus environmentally non-friendly. To overcome the SU-8 stripping limitations, design of a negative resist system where solubility change is not based solely on cross- linking but also on the differentiation of hydrophilicity between exposed and non-exposed areas is desirable. A new resist formulation, fulfilling the above specifications has been developed recently [1]. This formulation is based on a specific grade epoxy novolac (EP) polymer, a partially hydrogenated poly-4-hydroxy styrene (PHS) polymer, and an onium salt as photoacid generator (PAG), and has been successfully applied

  19. Molecular-Scale Lubricants for Micromachine Applications: Final Report

    Energy Technology Data Exchange (ETDEWEB)

    Burns, A.R.; Dugger, M.T.; Houston, J.E.; Lopez, G.P.; Mayer, T.M.; Michalske, T.A.; Miller, S.L.; Sniegowski, J.J.; Stevens, M.J.; Zhou, Y.

    1998-12-01

    The nature of this work was to develop the physics and chemistry base for understanding molecular-scale lubricants used to reduce of friction- and adhesion-induced failure in silicon micromachines (MEMS). We acquired this new knowledge by tailoring the molecular properties of the lubricants, applying local probes that can directly monitor the response of lubricants in contact conditions, and evaluating the performance of model lubricants MEMS devices. Model lubricants under investigation were the silane coupling agents that form monolayer films on native oxide silicon surfaces, which is the substrate in MEMS. These molecules bind via strong surface bonds and produce a layer of hydro- or fluoro-carbon chains normal to the substrate. "Tailoring" the lubricants entails modifying the chain length, the chain chemical reactivity (H or F), and the density of chain structures. Thus much effort went into understanding the surface chemistry of silane-silicon oxide coupling. With proximal probes such as atomic force microscopy (AFM), interracial force microscopy (FM), and shear force microscopy in combination with IFM, we examined the frictional and adhesive properties of the silane films with very high spatial resolution (< 100 nm) and sensitivity. MEMS structures are treated with silanes under identical conditions, and examined for friction and adhesion under operating conditions. Proper assessment of the lubricants required quantitative analysis of MEMS performance at high speeds and long operating times. Our proximal probe measurements and WS performance analyses form a very important link for future molecular dynamics simulations, that, in turn, should be able to predict MEMS performance under all conditions.

  20. Micromachined infrared sensors with device-level encapsulation

    Science.gov (United States)

    Dave, Aasutosh; Celik-Butler, Zeynep; Butler, Donald P.

    2005-05-01

    There have been recent innovations to reduce the cost of packaging for MEMS devices, without deteriorating their performance. One such novel design for device-level encapsulation (self-packaged) of uncooled infrared (IR) microbolometers is documented here. Device-level vacuum encapsulation has the potential to eliminate some major problems associated with the bolometer performance such as high thermal conductance of the ambient atmosphere, the high cost associated with conventional vacuum packaging, and the degradation of optical transmission at different wavelengths through a conventional package window. The device-level encapsulated bolometers can also be fabricated with flexible substrates, which have the advantage of conforming to non-planar surfaces compared to Si or other rigid substrates. In addition, a flexible superstrate with low shear stress has applications in robotics, aerospace, defense and biomedicine as a "Smart skin", a name given to multisensory arrays on conformal substrates to emulate human skin functions on inanimate objects. Self-packaged uncooled microbolometer arrays of 40x40 μm2 and 60x60 μm2 are fabricated on top of Si wafer with a sacrificial layer using semiconducting Yttrium Barium Copper Oxide (YBCO) as the infrared sensing material. A two-layer surface micromachining technique in conjunction with a resonant cavity and a reflecting mirror are used for the sensor structure. The devices have demonstrated voltage responsivities of 7.9x103 V/W with a temperature coefficient of resistance of -2.5% K-1, and thermal conductivity of 2.95x10-6 W/K. The device performance was similar in air and vacuum, demonstrating vacuum integrity and a good device-level encapsulation.