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Sample records for capacitive micromachined ultrasonic

  1. Capacitive micromachined ultrasonic transducer arrays as tunable acoustic metamaterials

    Energy Technology Data Exchange (ETDEWEB)

    Lani, Shane W., E-mail: shane.w.lani@gmail.com, E-mail: karim.sabra@me.gatech.edu, E-mail: levent.degertekin@me.gatech.edu; Sabra, Karim G. [George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, 801Ferst Drive, Georgia 30332-0405 (United States); Wasequr Rashid, M.; Hasler, Jennifer [School of Electrical and Computer Engineering, Georgia Institute of Technology, Van Leer Electrical Engineering Building, 777 Atlantic Drive NW, Atlanta, Georgia 30332-0250 (United States); Levent Degertekin, F. [George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, 801Ferst Drive, Georgia 30332-0405 (United States); School of Electrical and Computer Engineering, Georgia Institute of Technology, Van Leer Electrical Engineering Building, 777 Atlantic Drive NW, Atlanta, Georgia 30332-0250 (United States)

    2014-02-03

    Capacitive Micromachined Ultrasonic Transducers (CMUTs) operating in immersion support dispersive evanescent waves due to the subwavelength periodic structure of electrostatically actuated membranes in the array. Evanescent wave characteristics also depend on the membrane resonance which is modified by the externally applied bias voltage, offering a mechanism to tune the CMUT array as an acoustic metamaterial. The dispersion and tunability characteristics are examined using a computationally efficient, mutual radiation impedance based approach to model a finite-size array and realistic parameters of variation. The simulations are verified, and tunability is demonstrated by experiments on a linear CMUT array operating in 2-12 MHz range.

  2. Experimental Analysis of Bisbenzocyclobutene Bonded Capacitive Micromachined Ultrasonic Transducers

    OpenAIRE

    2016-01-01

    Experimental measurement results of a 1.75 mm × 1.75 mm footprint area Capacitive Micromachined Ultrasonic Transducer (CMUT) planar array fabricated using a bisbenzocyclobutene (BCB)-based adhesive wafer bonding technique has been presented. The array consists of 40 × 40 square diaphragm CMUT cells with a cavity thickness of 900 nm and supported by 10 µm wide dielectric spacers patterned on a thin layer of BCB. A 150 µm wide one µm thick gold strip has been used as the contact pad for gold wi...

  3. Experimental Analysis of Bisbenzocyclobutene Bonded Capacitive Micromachined Ultrasonic Transducers

    Science.gov (United States)

    Manwar, Rayyan; Chowdhury, Sazzadur

    2016-01-01

    Experimental measurement results of a 1.75 mm × 1.75 mm footprint area Capacitive Micromachined Ultrasonic Transducer (CMUT) planar array fabricated using a bisbenzocyclobutene (BCB)-based adhesive wafer bonding technique has been presented. The array consists of 40 × 40 square diaphragm CMUT cells with a cavity thickness of 900 nm and supported by 10 µm wide dielectric spacers patterned on a thin layer of BCB. A 150 µm wide one µm thick gold strip has been used as the contact pad for gold wire bonding. The measured resonant frequency of 19.3 MHz using a Polytec™ laser Doppler vibrometer (Polytec™ MSA-500) is in excellent agreement with the 3-D FEA simulation result using IntelliSuite™. An Agilent ENA5061B vector network analyzer (VNA) has been used for impedance measurement and the resonance and anti-resonance values from the imaginary impedance curve were used to determine the electromechanical coupling co-efficient. The measured coupling coefficient of 0.294 at 20 V DC bias exhibits 40% higher transduction efficiency as compared to a measured value published elsewhere for a silicon nitride based CMUT. A white light interferometry method was used to measure the diaphragm deflection profiles at different DC bias. The diaphragm center velocity was measured for different sub-resonant frequencies using a Polytec™ laser Doppler vibrometer that confirms vibration of the diaphragm at different excitation frequencies and bias voltages. Transmit and receive operations of CMUT cells were characterized using a pitch-catch method and a −6 dB fractional bandwidth of 23% was extracted from the received signal in frequency domain. From the measurement, it appears that BCB-based CMUTs offer superior transduction efficiency as compared to silicon nitride or silicon dioxide insulator-based CMUTs, and provide a very uniform deflection profile thus making them a suitable candidate to fabricate highly energy efficient CMUTs. PMID:27347955

  4. Chemical vapor detection using a capacitive micromachined ultrasonic transducer.

    Science.gov (United States)

    Lee, Hyunjoo J; Park, Kwan Kyu; Kupnik, Mario; Oralkan, O; Khuri-Yakub, Butrus T

    2011-12-15

    Distributed sensing of gas-phase chemicals using highly sensitive and inexpensive sensors is of great interest for many defense and consumer applications. In this paper we present ppb-level detection of dimethyl methylphosphonate (DMMP), a common simulant for sarin gas, with a ppt-level resolution using an improved capacitive micromachined ultrasonic transducer (CMUT) as a resonant chemical sensor. The improved CMUT operates at a higher resonant frequency of 47.7 MHz and offers an improved mass sensitivity of 48.8 zg/Hz/μm(2) by a factor of 2.7 compared to the previous CMUT sensors developed. A low-noise oscillator using the CMUT resonant sensor as the frequency-selective device was developed for real-time sensing, which exhibits an Allan deviation of 1.65 Hz (3σ) in the presence of a gas flow; this translates into a mass resolution of 80.5 zg/μm(2). The CMUT resonant sensor is functionalized with a 50-nm thick DKAP polymer developed at Sandia National Laboratory for dimethyl methylphosphonate (DMMP) detection. To demonstrate ppb-level detection of the improved chemical sensor system, the sensor performance was tested at a certified lab (MIT Lincoln Laboratory), which is equipped with an experimental chemical setup that reliably and accurately delivers a wide range of low concentrations down to 10 ppb. We report a high volume sensitivity of 34.5 ± 0.79 pptv/Hz to DMMP and a good selectivity of the polymer to DMMP with respect to dodecane and 1-octanol.

  5. An equivalent circuit model for transmitting capacitive micromachined ultrasonic transducers in collapse mode.

    Science.gov (United States)

    Olcum, Selim; Yamaner, F Yalcin; Bozkurt, Ayhan; Köymen, Hayrettin; Atalar, Abdullah

    2011-07-01

    The collapse mode of operation of capacitive micromachined ultrasonic transducers (CMUTs) was shown to be a very effective way to achieve high output pressures. However, no accurate analytical or equivalent circuit model exists for understanding the mechanics and limits of the collapse mode. In this work, we develop an equivalent nonlinear electrical circuit that can accurately simulate the mechanical behavior of a CMUT with given dimensions and mechanical parameters under any large or small signal electrical excitation, including the collapse mode. The static and dynamic deflections of a plate predicted from the model are compared with finite element simulations. The equivalent circuit model can estimate the static deflection and transient behavior of a CMUT plate to within 5% accuracy. The circuit model is in good agreement with experimental results of pulse excitation applied to fabricated CMUTs. The model is suitable as a powerful design and optimization tool for collapsed and uncollapsed CMUTs.

  6. Fabrication of Capacitive Micromachined Ultrasonic Transducers Using a Boron Etch-Stop Method

    DEFF Research Database (Denmark)

    Diederichsen, Søren Elmin; Sandborg-Olsen, Filip; Engholm, Mathias;

    2016-01-01

    Capacitive Micromachined Ultrasonic Transducers (CMUTs) fabricated using Silicon-On-Insulator (SOI) wafers often have large thickness variation of the flexible plate, which causes variation in both pull-in voltage and resonant frequency across the CMUT array. This work presents a bond and boron...... etch-stop scheme for fabricating the flexible plate of a CMUT. The proposed fabrication method enables precise control of the plate thickness variation and is a low cost alternative to the SOI-based process. N-type silicon wafers are doped with boron to a surface concentration of > 1020 cm−3 using...... solid planar diffusion predeposition at 1125 °C for 30, 60, and 90 min. Process simulations are used to predict the boron doping profiles and validated with secondary ion mass spectrometry measurements. The doped wafers are fusion-bonded to a silicon dioxide surface and thinned down using an 80 °C, 20...

  7. An FPGA-based ultrasound imaging system using capacitive micromachined ultrasonic transducers.

    Science.gov (United States)

    Wong, Lawrence L P; Chen, Albert I; Logan, Andrew S; Yeow, John T W

    2012-07-01

    We report the design and experimental results of a field-programmable gate array (FPGA)-based real-time ultrasound imaging system that uses a 16-element phased-array capacitive micromachined ultrasonic transducer fabricated using a fusion bonding process. The imaging system consists of the transducer, discrete analog components situated on a custom-made circuit board, the FPGA, and a monitor. The FPGA program consists of five functional blocks: a main counter, transmit and receive beamformer, receive signal pre-processing, envelope detection, and display. No dedicated digital signal processor or personal computer is required for the imaging system. An experiment is carried out to obtain the sector B-scan of a 4-wire target. The ultrasound imaging system demonstrates the possibility of an integrated system-in-a-package solution.

  8. Capacitive Micromachined Ultrasonic Transducer Arrays for Integrated Diagnostic/Therapeutic Catheters

    Science.gov (United States)

    Wong, Serena H.; Wygant, Ira O.; Yeh, David T.; Zhuang, Xuefeng; Bayram, Baris; Kupnik, Mario; Oralkan, Omer; Ergun, A. Sanli; Yaralioglu, Goksen G.; Khuri-Yakub, Butrus T.

    2006-05-01

    In recent years, medical procedures have become increasingly non-invasive. These include endoscopic procedures and intracardiac interventions (e.g., pulmonary vein isolation for treatment of atrial fibrillation and plaque ablation for treatment of arteriosclerosis). However, current tools suffer from poor visualization and difficult coordination of multiple therapeutic and imaging devices. Dual-mode (imaging and therapeutic) ultrasound arrays provide a solution to these challenges. A dual-mode transducer can provide focused, noncontact ultrasound suitable for therapy and can be used to provide high quality real-time images for navigation and monitoring of the procedure. In the last decade, capacitive micromachined ultrasonic transducers (CMUTs), have become an attractive option for ultrasonic imaging systems due to their fabrication flexibility, improved bandwidth, and integration with electronics. The CMUT's potential in therapeutic applications has also been demonstrated by surface output pressures as high as 1MPa peak to peak and continuous wave (CW) operation. This paper reviews existing interventional CMUT arrays, demonstrates the feasibility of CMUTs for high intensity focused ultrasound (HIFU), and presents a design for the next-generation CMUTs for integrated imaging and HIFU endoscopic catheters.

  9. Fabrication and Characterization of Capacitive Micromachined Ultrasonic Transducers with Low-Temperature Wafer Direct Bonding

    Directory of Open Access Journals (Sweden)

    Xiaoqing Wang

    2016-12-01

    Full Text Available This paper presents a fabrication method of capacitive micromachined ultrasonic transducers (CMUTs by wafer direct bonding, which utilizes both the wet chemical and O2plasma activation processes to decrease the bonding temperature to 400 °C. Two key surface properties, the contact angle and surface roughness, are studied in relation to the activation processes, respectively. By optimizing the surface activation parameters, a surface roughness of 0.274 nm and a contact angle of 0° are achieved. The infrared images and static deflection of devices are assessed to prove the good bonding effect. CMUTs having silicon membranes with a radius of 60 μm and a thickness of 2 μm are fabricated. Device properties have been characterized by electrical and acoustic measurements to verify their functionality and thus to validate this low-temperature process. A resonant frequency of 2.06 MHz is obtained by the frequency response measurements. The electrical insertion loss and acoustic signal have been evaluated. This study demonstrates that the CMUT devices can be fabricated by low-temperature wafer direct bonding, which makes it possible to integrate them directly on top of integrated circuit (IC substrates.

  10. Second harmonic and subharmonic for non-linear wideband contrast imaging using a capacitive micromachined ultrasonic transducer array.

    Science.gov (United States)

    Novell, Anthony; Escoffre, Jean-Michel; Bouakaz, Ayache

    2013-08-01

    When insonified with suitable ultrasound excitation, contrast microbubbles generate various non-linear scattered components, such as the second harmonic (2H) and the subharmonic (SH). In this study, we exploit the wide frequency bandwidth of capacitive micromachined ultrasonic transducers (CMUTs) to enhance the response from ultrasound contrast agents by selective imaging of both the 2H and SH components simultaneously. To this end, contrast images using the pulse inversion method were recorded with a 64-element CMUT linear array connected to an open scanner. In comparison to imaging at 2H alone, the wideband imaging including both the 2H and SH contributions provided up to 130% and 180% increases in the signal-to-noise and contrast-to-tissue ratios, respectively. The wide-frequency band of CMUTs offers new opportunities for improved ultrasound contrast agent imaging.

  11. Design and Test of Capacitance Micro-machined Ultrasonic Transducer%微电容超声传感器的设计与测试

    Institute of Scientific and Technical Information of China (English)

    穆林枫; 张文栋; 何常德; 张睿; 宋金龙; 薛晨阳

    2015-01-01

    Due to the problem of higher parasitic of Capacitance Micro-machined Ultrasonic Transducer ( CMUT),isolation technology was adopted to apart the vibrating membrane from top electrode,which avoided the effect of doping.The capacitance change rate was the main line of the paper,the calculation and simulation of micro transducer and detection circuit were presented, which built the road between micro transducer and detection circuit.Test system underwater was also conducted.The test results show that the actual output voltage is 0.8 V,and the theory value is 0.61 V,which demonstrates the applicability of CMUT and the feasibility of test system.%针对现有微电容超声传感器( CMUT)寄生电容大的问题,采用绝缘技术将振动薄膜与上电极金属完全隔离的方法,避免了掺杂效应的发生,从而减小了寄生电容。文中以电容变化率为主线,分别对微传感器和跨阻检测电路的电容变化率进行了计算和仿真,建立了传感器与电路检测的通道,并通过水下测试系统的搭建,对其进行实验验证。测试结果表明,实际输出电压的值为0.8 V,与理论计算值0.61 V相近,从而验证了CMUT的可用性及其测试系统的可行性。

  12. A novel design of micromachined capacitive Lamb wave transducers

    Science.gov (United States)

    Ge, Lifeng

    2006-11-01

    A new design for micromachined capacitive Lamb wave transducers (mCLWT) has been developed. The design is based on a theoretical TDK model previously developed for groove ultrasonic transducers. By the investigation of the dynamic behavior of a rectangular high aspect ratio diaphragm of the mCLWTs, the second order bending mode of the diaphragm is exploited to excite and detect Lamb wave. The new exiting mechanism can minimize the energy of the acoustic radiation at the normal direction of the diaphragm so as to provide more energy coupled into the Lamb wave in the silicon substrate. Also, the natural frequencies and mode shapes of such a mCLWT can be determined accurately from its geometry and materials used, so the TDK model provides guidance for the optimal design of mCLWTs.

  13. Integration of Capacitive Micromachined Ultrasound Transducers to Microfluidic Devices

    KAUST Repository

    Viržonis, Darius

    2013-10-22

    The design and manufacturing flexibility of capacitive micromachined ultrasound transducers (CMUT) makes them attractive option for integration with microfluidic devices both for sensing and fluid manipulation. CMUT concept is introduced here by presentin

  14. Micromachined capacitive pressure sensor with signal conditioning electronics

    DEFF Research Database (Denmark)

    Fragiacomo, Giulio

    Micromachined capacitive pressure sensors for harsh environment together with interfacing electronic circuits have been studied in this project. Micro-electromechanical systems (MEMS) have been proposed as substitutes for macro scale sensor’s systems in many different fields and are the only...... a great deal of sensors are used. Pressure sensors are among the most successful MEMS and are used in a huge variety of applications. In this project an absolute capacitive pressure sensor has been developed with the aim to integrate it in pump control systems to improve the efficiency of the pump...

  15. Piezoelectric micromachined ultrasonic transducers for fingerprint sensing

    Science.gov (United States)

    Lu, Yipeng

    Fingerprint identification is the most prevalent biometric technology due to its uniqueness, universality and convenience. Over the past two decades, a variety of physical mechanisms have been exploited to capture an electronic image of a human fingerprint. Among these, capacitive fingerprint sensors are the ones most widely used in consumer electronics because they are fabricated using conventional complementary metal oxide semiconductor (CMOS) integrated circuit technology. However, capacitive fingerprint sensors are extremely sensitive to finger contamination and moisture. This thesis will introduce an ultrasonic fingerprint sensor using a PMUT array, which offers a potential solution to this problem. In addition, it has the potential to increase security, as it allows images to be collected at various depths beneath the epidermis, providing images of the sub-surface dermis layer and blood vessels. Firstly, PMUT sensitivity is maximized by optimizing the layer stack and electrode design, and the coupling coefficient is doubled via series transduction. Moreover, a broadband PMUT with 97% fractional bandwidth is achieved by utilizing a thinner structure excited at two adjacent mechanical vibration modes with overlapping bandwidth. In addition, we proposed waveguide PMUTs, which function to direct acoustic waves, confine acoustic energy, and provide mechanical protection for the PMUT array. Furthermore, PMUT arrays were fabricated with different processes to form the membrane, including front-side etching with a patterned sacrificial layer, front-side etching with additional anchor, cavity SOI wafers and eutectic bonding. Additionally, eutectic bonding allows the PMUT to be integrated with CMOS circuits. PMUTs were characterized in the mechanical, electrical and acoustic domains. Using transmit beamforming, a narrow acoustic beam was achieved, and high-resolution (sub-100 microm) and short-range (~1 mm) pulse-echo ultrasonic imaging was demonstrated using a steel

  16. Comparison of piezoresistive and capacitive ultrasonic transducers

    Science.gov (United States)

    Neumann, John J.; Greve, David W.; Oppenheim, Irving J.

    2004-07-01

    MEMS ultrasonic transducers for flaw detection have heretofore been built as capacitive diaphragm-type devices. A diaphragm forms a moveable electrode, placed at a short gap from a stationary electrode, and diaphragm movement has been detected by capacitance change. Although several research teams have successfully demonstrated that technology, the detection of capacitance change is adversely affected by stray and parasitic capacitances, limiting the sensitivity of such transducers and typically requiring relatively large diaphragm areas. We describe the design and fabrication of what to our knowledge is the first CMOS-MEMS ultrasonic phased array transducer using piezoresistive strain sensing. Piezoresistors have been patterned within the diaphragms, and diaphragm movement creates bending strain which is detected by a bridge circuit, for which conductor losses will be less significant. The prospective advantage of such piezoresistive transducers is that sufficient sensitivity may be achieved with very small diaphragms. We compare transducer response under fluid-coupled ultrasonic excitation and report the experimental gauge factor for the piezoresistors. We also discuss the phased array performance of the transducer in sensing the direction of an incoming wave.

  17. Resonant gravimetric immunosensing based on capacitive micromachined ultrasound transducers

    KAUST Repository

    Viržonis, Darius

    2014-04-08

    High-frequency (40 MHz) and low-frequency (7 MHz) capacitive micromachined ultrasound transducers (CMUT) were fabricated and tested for use in gravimetric detection of biomolecules. The low-frequency CMUT sensors have a gold-coated surface, while the high-frequency sensors have a silicon nitride surface. Both surfaces were functionalized with bovine leukemia virus antigen gp51 acting as the antigen. On addition of an a specific antibody labeled with horseradish peroxidase (HRP), the antigen/antibody complex is formed on the surface and quantified by HRP-catalyzed oxidation of tetramethylbenzidine. It has been found that a considerably smaller quantity of immuno complex is formed on the high frequency sensor surface. In parallel, the loading of the surface of the CMUT was determined via resonance frequency and electromechanical resistance readings. Following the formation of the immuno complexes, the resonance frequencies of the low-frequency and high-frequency sensors decrease by up to 420 and 440 kHz, respectively. Finite element analysis reveals that the loading of the (gold-coated) low frequency sensors is several times larger than that on high frequency sensors. The formation of the protein film with pronounced elasticity and stress on the gold surface case is discussed. We also discuss the adoption of this method for the detection of DNA using a hybridization assay following polymerase chain reaction.

  18. Dynamic mechanism and its modelling of micromachined electrostatic ultrasonic transducers

    Institute of Scientific and Technical Information of China (English)

    葛立峰

    1999-01-01

    A tensile-plate-on-air-spring model (or called TDK model for short) for micromachined electrostatic ultrasonic transducers has been developed based on a thorough investigation of their dynamic mechanism. The mechanical stiffness effects caused by the compressibility of air gaps, bending stiffness of the diaphragm and in-plane tension applied to the diaphragm, together with an electrostatic negative stiffness effect are included completely in the model. Desired particular fundamental frequency and bandwidth can be obtained by only properly tailoring the geometry, dimensions and materials of transducers according to the model, which provides thereby a reliable theoretical basis for the understanding and optimised design of such transducers.

  19. Theoretical model and optimal design of silicon micromachined ultrasonic imaging transducers

    Institute of Scientific and Technical Information of China (English)

    GE; LiFeng

    2007-01-01

    A theoretical model and mathematical description for silicon micromachined electrostatic or capacitive ultrasonic imaging transducers have been developed. According to the model the basic performance parameters of such a transducer, such as natural frequencies, eigenfunctions, resonance and anti-resonance frequencies, and the mechanical impedance of the diaphragm can be predicted from the geometry of the transducer and property parameters of materials used. The paper reveals that this type of transducers has two basic operation modes, corresponding to the resonance of a mass-spring oscillator comprised of the diaphragm and the air cushion, and the first-order bending mode of the diaphragm itself respectively, and presents an optimal method for extending the bandwidth by making the two modes coupled, and thereby provides a theoretical basis for the optimal design.

  20. Multiplexed operation of a micromachined ultrasonic droplet ejector array.

    Science.gov (United States)

    Forbes, Thomas P; Degertekin, F Levent; Fedorov, Andrei G

    2007-10-01

    A dual-sample ultrasonic droplet ejector array is developed for use as a soft-ionization ion source for multiplexed mass spectrometry (MS). Such a multiplexed ion source aims to reduce MS analysis time for multiple analyte streams, as well as allow for the synchronized ejection of the sample(s) and an internal standard for quantitative results and mass calibration. Multiplexing is achieved at the device level by division of the fluid reservoir and separating the active electrodes of the piezoelectric transducer for isolated application of ultrasonic wave energy to each domain. The transducer is mechanically shaped to further reduce the acoustical crosstalk between the domains. Device design is performed using finite-element analysis simulations and supported by experimental characterization. Isolated ejection of approximately 5 microm diameter water droplets from individual domains in the micromachined droplet ejector array at around 1 MHz frequency is demonstrated by experiments. The proof-of-concept demonstration using a dual-sample device also shows potential for multiplexing with larger numbers of analytes.

  1. Touch mode micromachined capacitive pressure sensor with signal conditioning electronics

    DEFF Research Database (Denmark)

    Fragiacomo, Giulio; Eriksen, Gert F.; Christensen, Carsten

    2010-01-01

    is one of the key challenges nowadays. In this context, house heating is a priority for environmental issues. For this reason, the possibilities of using a low power consumption technique, such as capacitive pressure sensing, in harsh environments is a concrete market opportunity. Our aim is therefore....... A measurement setup was arranged and tested for accuracy and reliability with respect to hysteresis. Finally, designs with different radii of the top plate were characterized by a capacitance versus pressure curve at different frequencies and temperatures (Fig. 3). Industrial possibilities Energy saving systems...

  2. Waveguide piezoelectric micromachined ultrasonic transducer array for short-range pulse-echo imaging

    Science.gov (United States)

    Lu, Y.; Tang, H.; Wang, Q.; Fung, S.; Tsai, J. M.; Daneman, M.; Boser, B. E.; Horsley, D. A.

    2015-05-01

    This paper presents an 8 × 24 element, 100 μm-pitch, 20 MHz ultrasound imager based on a piezoelectric micromachined ultrasonic transducer (PMUT) array having integrated acoustic waveguides. The 70 μm diameter, 220 μm long waveguides function both to direct acoustic waves and to confine acoustic energy, and also to provide mechanical protection for the PMUT array used for surface-imaging applications such as an ultrasonic fingerprint sensor. The imager consists of a PMUT array bonded with a CMOS ASIC using wafer-level conductive eutectic bonding. This construction allows each PMUT in the array to have a dedicated front-end receive amplifier, which together with on-chip analog multiplexing enables individual pixel read-out with high signal-to-noise ratio through minimized parasitic capacitance between the PMUT and the front-end amplifier. Finite element method simulations demonstrate that the waveguides preserve the pressure amplitude of acoustic pulses over distances of 600 μm. Moreover, the waveguide design demonstrated here enables pixel-by-pixel readout of the ultrasound image due to improved directivity of the PMUT by directing acoustic waves and creating a pressure field with greater spatial uniformity at the end of the waveguide. Pulse-echo imaging experiments conducted using a one-dimensional steel grating demonstrate the array's ability to form a two-dimensional image of a target.

  3. Highly sensitive micromachined capacitive pressure sensor with reduced hysteresis and low parasitic capacitance

    DEFF Research Database (Denmark)

    Pedersen, Thomas; Fragiacomo, Giulio; Hansen, Ole

    2009-01-01

    This paper describes the design and fabrication of a capacitive pressure sensor that has a large capacitance signal and a high sensitivity of 76 pF/bar in touch mode operation. Due to the large signal, problems with parasitic capacitances are avoided and hence it is possible to integrate the sens...... bonding to create vacuum cavities. The exposed part of the sensor is perfectly flat such that it can be coated with corrosion resistant thin films. Hysteresis is an inherent problem in touch mode capacitive pressure sensors and a technique to significantly reduce it is presented....

  4. Nanoelectrospray ion generation for high-throughput mass spectrometry using a micromachined ultrasonic ejector array

    Science.gov (United States)

    Aderogba, S.; Meacham, J. M.; Degertekin, F. L.; Fedorov, A. G.; Fernandez, F. M.

    2005-05-01

    Ultrasonic electrospray ionization (ESI) for high-throughput mass spectrometry is demonstrated using a silicon micromachined microarray. The device uses a micromachined ultrasonic atomizer operating in the 900kHz-2.5MHz range for droplet generation and a metal electrode in the fluid cavity for ionization. Since the atomization and ionization processes are separated, the ultrasonic ESI source shows the potential for operation at low voltages with a wide range of solvents in contrast with conventional capillary ESI technology. This is demonstrated using the ultrasonic ESI microarray to obtain the mass spectrum of a 10μM reserpine sample on a time of flight mass spectrometer with 197:1 signal-to-noise ratio at an ionization potential of 200V.

  5. Simulating Capacitive Micromachined Ultrasonic Transducers (CMUTs) using Field II

    DEFF Research Database (Denmark)

    Bæk, David; Oralkan, Omer; Kupnik, Mario;

    2010-01-01

    Field II has been a recognized simulation tool for piezoceramic medical transducer arrays for more than a decade. The program has its strength in doing fast computations of the spatial impulse response (SIR) from array elements by dividing the elements into smaller mathematical elements (ME)s from...... which it calculates the SIR responses. The program features predefined models for classical transducer geometries, but currently none for the fast advancing CMUTs. This work addresses the assumptions required for modeling CMUTs with Field II. It is shown that rectangular array elements, populated...

  6. Design, simulation and testing of capacitive micromachined ultrasound transducer-based phospholipidic biosensor elements

    Science.gov (United States)

    Sapeliauskas, E.; Vanagas, G.; Barauskas, D.; Mikolajunas, M.; Pakenas, E.; Pelenis, D.; Sergalis, G.; Jukna, T.; Virzonis, D.

    2015-07-01

    In this study we present theoretical proof of the principle of using interdigital capacitive micromachined ultrasound transducers (CMUT IDTs) for the detection of phospholipid membrane elasticity. Proof of principle was needed to find out whether the new type of microelectromechanical sensors of the toxins incorporated with the lipid membranes was feasible. CMUT IDTs for 10 MHz operation in water, with 146 µm spaced double fingers were designed and fabricated using the surface micromachining technique. Fabricated CMUTs were tested for their resonance in air and for Scholte-type wave transmission in deionized water and isopropanol solutions containing 0%, 10% and 20% water. The amplitude and phase velocity of the excited and received Scholte waves were measured in a 200 µm height microchannel, capped with a thick layer of soft polymer, which suppressed the production of non-informative guided waves. It was determined that the average sensitivity of Scholte wave phase velocity within the given range of solution concentrations is 2.9 m s-1 per one percent. Experimental data were also used to verify the adequacy of the finite element model, which was found to be suitable for reliable prediction of the phospholipid membrane elasticity impact on the Scholte wave phase velocity or the resonance frequency in the present IDT structure. It was determined that for the analyzed conditions (the elasticity of simulated phospholipid membrane changed from 1 to 5 GPa) the sensitivity of the measurement channel is expected to be no worse than 2 kHz GPa-1 in terms of the Scholte wave and CMUT IDT resonance frequency. This leads to a positive conclusion on the feasibility of the new sensor type.

  7. Investigation of capacitively coupled ultrasonic transducer system for nondestructive evaluation.

    Science.gov (United States)

    Zhong, Cheng Huan; Wilcox, Paul D; Croxford, Anthony J

    2013-12-01

    Capacitive coupling offers a simple solution to wirelessly probe ultrasonic transducers. This paper investigates the theory, feasibility, and optimization of such a capacitively coupled transducer system (CCTS) in the context of nondestructive evaluation (NDE) applications. The noncontact interface relies on an electric field formed between four metal plates-two plates are physically connected to the electrodes of a transducer, the other two are in a separate probing unit connected to the transmit/receive channel of the instrumentation. The complete system is modeled as an electric network with the measured impedance of a bonded piezoelectric ceramic disc representing a transducer attached to an arbitrary solid substrate. A transmission line model is developed which is a function of the physical parameters of the capacitively coupled system, such as the permittivity of the material between the plates, the size of the metal plates, and their relative positions. This model provides immediate prediction of electric input impedance, pulse-echo response, and the effect of plate misalignment. The model has been validated experimentally and has enabled optimization of the various parameters. It is shown that placing a tuning inductor and series resistor on the transmitting side of the circuit can significantly improve the system performance in terms of the signal-to-crosstalk ratio. Practically, bulk-wave CCTSs have been built and demonstrated for underwater and through-composite testing. It has been found that electrical conduction in the media between the plates limits their applications.

  8. Micromachined high frequency PMN-PT/epoxy 1-3 composite ultrasonic annular array.

    Science.gov (United States)

    Liu, Changgeng; Djuth, Frank; Li, Xiang; Chen, Ruimin; Zhou, Qifa; Shung, K Kirk

    2012-04-01

    This paper reports the design, fabrication, and performance of miniature micromachined high frequency PMN-PT/epoxy 1-3 composite ultrasonic annular arrays. The PMN-PT single crystal 1-3 composites were made with micromachining techniques. The area of a single crystal pillar was 9×9 μm. The width of the kerf among pillars was ∼5 μm and the kerfs were filled with a polymer. The composite thickness was 25 μm. A six-element annular transducer of equal element area of 0.2 mm(2) with 16 μm kerf widths between annuli was produced. The aperture size the array transducer is about 1.5 mm in diameter. A novel electrical interconnection strategy for high density array elements was implemented. After the transducer was attached to the electric connection board and packaged, the array transducer was tested in a pulse/echo arrangement, whereby the center frequency, bandwidth, two-way insertion loss (IL), and cross talk between adjacent elements were measured for each annulus. The center frequency was 50 MHz and -6 dB bandwidth was 90%. The average insertion loss was 19.5 dB at 50 MHz and the crosstalk between adjacent elements was about -35 dB. The micromachining techniques described in this paper are promising for the fabrication of other types of high frequency transducers, e.g. 1D and 2D arrays.

  9. Silicon micromachined ultrasonic scalpel for the dissection and coagulation of tissue.

    Science.gov (United States)

    Lockhart, R; Friedrich, F; Briand, D; Margairaz, P; Sandoz, J-P; Brossard, J; Keppner, H; Olson, W; Dietz, T; Tardy, Y; Meyer, H; Stadelmann, P; Robert, C; Boegli, A; Farine, P-A; de Rooij, N F; Burger, J

    2015-08-01

    This work presents a planar, longitudinal mode ultrasonic scalpel microfabricated from monocrystalline silicon wafers. Silicon was selected as the material for the ultrasonic horn due to its high speed of sound and thermal conductivity as well as its low density compared to commonly used titanium based alloys. Combined with a relatively high Young's modulus, a lighter, more efficient design for the ultrasonic scalpel can be implemented which, due to silicon batch manufacturing, can be fabricated at a lower cost. Transverse displacement of the piezoelectric actuators is coupled into the planar silicon structure and amplified by its horn-like geometry. Using finite element modeling and experimental displacement and velocity data as well as cutting tests, key design parameters have been identified that directly influence the power efficiency and robustness of the device as well as its ease of controllability when driven in resonance. Designs in which the full- and half-wave transverse modes of the transducer are matched or not matched to the natural frequencies of the piezoelectric actuators have been evaluated. The performance of the Si micromachined scalpels has been found to be comparable to existing commercial titanium based ultrasonic scalpels used in surgical operations for efficient dissection of tissue as well as coaptation and coagulation of tissue for hemostasis. Tip displacements (peak-to-peak) of the scalpels in the range of 10-50 μm with velocities ranging from 4 to 11 m/s have been achieved. The frequency of operation is in the range of 50-100 kHz depending on the transverse operating mode and the length of the scalpel. The cutting ability of the micromachined scalpels has been successfully demonstrated on chicken tissue.

  10. Capacitive Ultrasonic Transducer Development for Acoustic Anemometry on Mars

    Science.gov (United States)

    Leonard-Pugh, Eurion; Wilson, C.; Calcutt, S.; Davis, L.

    2012-10-01

    Previous Mars missions have used either mechanical or thermal anemometry techniques. The moving parts of mechanical anemometers are prone to damage during launch and landing and their inertia makes them unsuited for turbulence studies. Thermal anemometers have been used successfully on Mars but are difficult to calibrate and susceptible to varying ambient temperatures. In ultrasonic anemometry, wind speed and sound speed are calculated from two-way time-of-flight measurements between pairs of transducers; three pairs of transducers are used to return a 3-D wind vector. These high-frequency measurements are highly reliable and immune from drift. Piezo-electric ultrasonic anemometers are widely used on Earth due to their full-range accuracy and high measurement frequency. However these transducers have high acoustic impedances and would not work on Mars. We are developing low-mass capacitive ultrasonic transducers for Mars missions which have significantly lower acoustic impedances and would therefore have a much stronger coupling to the Martian atmosphere. These transducers consist of a metallised polymer film pulled taught against a machined metal backplane. The film is drawn towards the backplane by a DC bias voltage. A varying signal is used on top of the DC bias to oscillate the film; generating acoustic waves. This poster will look at the operation of such sensors and the developments necessary to operate the devices under Martian conditions. Transducer performance is determined primarily by two elements; the front film and the backplane. The sensitivity of the transducer is affected by the thickness of the front film; as well as the diameter, curvature and roughness of the metal backplane. We present data on the performance of the sensors and instrument design considerations including signal shapes and transducer arrangements.

  11. Ultrasonic fingerprint sensor using a piezoelectric micromachined ultrasonic transducer array integrated with complementary metal oxide semiconductor electronics

    Energy Technology Data Exchange (ETDEWEB)

    Lu, Y.; Fung, S.; Wang, Q.; Horsley, D. A. [Berkeley Sensor and Actuator Center, University of California, Davis, 1 Shields Avenue, Davis, California 95616 (United States); Tang, H.; Boser, B. E. [Berkeley Sensor and Actuator Center, University of California, Berkeley, California 94720 (United States); Tsai, J. M.; Daneman, M. [InvenSense, Inc., 1745 Technology Drive, San Jose, California 95110 (United States)

    2015-06-29

    This paper presents an ultrasonic fingerprint sensor based on a 24 × 8 array of 22 MHz piezoelectric micromachined ultrasonic transducers (PMUTs) with 100 μm pitch, fully integrated with 180 nm complementary metal oxide semiconductor (CMOS) circuitry through eutectic wafer bonding. Each PMUT is directly bonded to a dedicated CMOS receive amplifier, minimizing electrical parasitics and eliminating the need for through-silicon vias. The array frequency response and vibration mode-shape were characterized using laser Doppler vibrometry and verified via finite element method simulation. The array's acoustic output was measured using a hydrophone to be ∼14 kPa with a 28 V input, in reasonable agreement with predication from analytical calculation. Pulse-echo imaging of a 1D steel grating is demonstrated using electronic scanning of a 20 × 8 sub-array, resulting in 300 mV maximum received amplitude and 5:1 contrast ratio. Because the small size of this array limits the maximum image size, mechanical scanning was used to image a 2D polydimethylsiloxane fingerprint phantom (10 mm × 8 mm) at a 1.2 mm distance from the array.

  12. Analytic solution for N-electrode actuated piezoelectric disk with application to piezoelectric micromachined ultrasonic transducers.

    Science.gov (United States)

    Smyth, Katherine; Bathurst, Stephen; Sammoura, Firas; Kim, Sang-Gook

    2013-08-01

    In this work, the deflection equation of a piezoelectrically-driven micromachined ultrasonic transducer (PMUT) is analytically determined using a Green's function approach. With the Green's function solution technique, the deflection of a circular plate with an arbitrary circular/ring electrode geometry is explicitly solved for axisymmetric vibration modes. For a PMUT with one center electrode covering ≈60% of the plate radius, the Green's function solution compares well with existing piece-wise and energy-based solutions with errors of less than 1%. The Green's function solution is also simpler than them requiring no numerical integration, and applies to any number of axisymmetric electrode geometries. Experimentally measured static deflection data collected from a fabricated piezoelectric micro ultrasonic transducer (PMUT) is further used to validate the Green's function model analysis. The center deflection and deflection profile data agree well with the Green's function solution over a range of applied bias voltages (5 to 21 V) with the average error between the experimental and Green's function data less than 9%.

  13. Fabrication and characterization of a smart epitaxial piezoelectric micromachined ultrasonic transducer

    Energy Technology Data Exchange (ETDEWEB)

    Ozaki, Katsuya [Department of Electrical and Electronic Information Engg, Toyohashi University of Technology, Toyohashi, Aichi 441-8580 (Japan); Matin, Abdul, E-mail: matin.md.a@gmail.com [Department of Glass and Ceramic Engineering, Bangladesh University of Engg and Tech (BUET), Dhaka 1000 (Bangladesh); Numata, Yasuyuki [Department of Electrical and Electronic Information Engg, Toyohashi University of Technology, Toyohashi, Aichi 441-8580 (Japan); Akai, Daisuke [Electronics-Inspired Interdisciplinary Research Institute (EIIRIS), Toyohashi University of Technology Toyohashi, Toyohahsi, Aichi 441-8580 (Japan); Sawada, Kazuaki; Ishida, Makoto [Department of Electrical and Electronic Information Engg, Toyohashi University of Technology, Toyohashi, Aichi 441-8580 (Japan); Electronics-Inspired Interdisciplinary Research Institute (EIIRIS), Toyohashi University of Technology Toyohashi, Toyohahsi, Aichi 441-8580 (Japan)

    2014-12-15

    Highlights: • Highly [1 1 1] orientated functional PZT(1 1 1) thin film was grown on n-Si(1 1 1)/γ-Al{sub 2}O{sub 3}(1 1 1)/SrRuO{sub 3}(1 1 1). • Device performance of pMUT was studied using both experiment and modeling. • Material anisotropy played a significant role in the shifting of resonant frequency • pMUT shows high sensitivity for the transmission of ultrasonic pulses. • Successful realization of a piezoelectric ultrasonic transducer (pMUT) array. - Abstract: A novel piezoelectric micromachined ultrasonic transducer (pMUT) array was designed and fabricated using epitaxially grown functional Pb(Zr{sub 0.52}Ti{sub 0.48})O{sub 3} (PZT) thin film on Si(1 1 1)/γ-Al{sub 2}O{sub 3}(1 1 1)/SrRuO{sub 3}(1 1 1) substrate for biomedical applications. The crystallographic orientation of PZT film was controlled by the incorporation of epitaxial γ-Al{sub 2}O{sub 3} film on Si substrate. Modal shape of pMUT was analyzed employing advanced 3D finite element modeling taking the crystallographic anisotropy of materials and the properties of immersed medium (air or water) into account. Eigenfrequency with mode shapes has shown to have significant influence on transmitting-receiving characteristics of pMUT. Modal shapes of pMUT were also quantitatively determined using Laser Doppler Vibratometry (LDV). An excellent correlation was obtained between computational and experimental results. A significantly high sensitivity of 3.9 μV/kPa was obtained in an under-water ultrasonic wave transmission experiment conducted using fabricated pMUT as wave transmitter and a commercial transducer as receiver at a fundamental frequency of 1.20 MHz. Advanced FE computation thus serves as a tool to a priori optimize device structure for the successful transmission of ultrasonic waves with sufficient power to generate high resolution 3D imaging.

  14. Capacitive transducer development for ultrasonic anemometry on Mars

    Science.gov (United States)

    Leonard-Pugh, E. W. K.; Wilson, C. F.; Calcutt, S. B.; Davis, L. A. J.

    2011-10-01

    Ultrasonic wind sensors are widely used on Earth due to their full-range accuracy and high measurement frequency. This poster will look at the operation of such sensors and the developments necessary to operate the devices under Martian conditions.

  15. PMN-PT single crystal thick films on silicon substrate for high-frequency micromachined ultrasonic transducers

    Energy Technology Data Exchange (ETDEWEB)

    Peng, J.; Lau, S.T.; Chao, C.; Dai, J.Y.; Chan, H.L.W. [The Hong Kong Polytechnic University, Department of Applied Physics and Materials Research Center, Hong Kong (China); Luo, H.S. [Chinese Academy of Sciences, The State Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Shanghai (China); Zhu, B.P.; Zhou, Q.F.; Shung, K.K. [University of Southern California, Department of Biomedical Engineering and NIH Transducer Resource Center, Los Angeles, CA (United States)

    2010-01-15

    In this work, a novel high-frequency ultrasonic transducer structure is realized by using PMNPT-on-silicon technology and silicon micromachining. To prepare the single crystalline PMNPT-on-silicon wafers, a hybrid processing method involving wafer bonding, mechanical lapping and wet chemical thinning is successfully developed. In the transducer structure, the active element is fixed within the stainless steel needle housing. The measured center frequency and -6 dB bandwidth of the transducer are 35 MHz and 34%, respectively. Owing to the superior electromechanical coupling coefficient (k{sub t}) and high piezoelectric constant (d{sub 33}) of PMNPT film, the transducer shows a good energy conversion performance with a very low insertion loss down to 8.3 dB at the center frequency. (orig.)

  16. PMN-PT single crystal thick films on silicon substrate for high-frequency micromachined ultrasonic transducers.

    Science.gov (United States)

    Peng, J; Lau, S T; Chao, C; Dai, J Y; Chan, H L W; Luo, H S; Zhu, B P; Zhou, Q F; Shung, K K

    2008-11-02

    In this work, a novel high-frequency ultrasonic transducer structure is realized by using PMNPT-on-silicon technology and silicon micromachining. To prepare the single crystalline PMNPT-on-silicon wafers, a hybrid processing method involving wafer bonding, mechanical lapping and wet chemical thinning is successfully developed. In the transducer structure, the active element is fixed within the stainless steel needle housing. The measured center frequency and -6 dB bandwidth of the transducer are 35 MHz and 34%, respectively. Owing to the superior electromechanical coupling coefficient (k(t)) and high piezoelectric constant (d(33)) of PMNPT film, the transducer shows a good energy conversion performance with a very low insertion loss down to 8.3 dB at the center frequency.

  17. Design and implementation of capacitive micromachined ultrasonic transducers for high intensity focused ultrasound

    OpenAIRE

    Yamaner, Yalçın Feysel; Yamaner, Yalcin Feysel

    2011-01-01

    High intensity focused ultrasound (HIFU) is a medical procedure for noninvasive treatment of cancers. High intensity focused ultrasound is used to heat and destroy the diseased tissue. Piezoelectricity has been the core mechanism for generation of ultrasound waves in the treatment. Focusing can be done by using spherically curved transducers or using a lens or electronically steering sound waves by using phased arrays. Current research in HIFU technology targets the development of MR-guided m...

  18. A parallel-architecture parametric equalizer for air-coupled capacitive ultrasonic transducers.

    Science.gov (United States)

    McSweeney, Sean G; Wright, William M D

    2012-01-01

    Parametric equalization is rarely applied to ultrasonic transducer systems, for which it could be used on either the transmitter or the receiver to achieve a desired response. An optimized equalizer with both bump and cut capabilities would be advantageous for ultrasonic systems in applications in which variations in the transducer performance or the properties of the propagating medium produce a less-than-desirable signal. Compensation for non-ideal transducer response could be achieved using equalization on a device-by-device basis. Additionally, calibration of ultrasonic systems in the field could be obtained by offline optimization of equalization coefficients. In this work, a parametric equalizer for ultrasonic applications has been developed using multiple bi-quadratic filter elements arranged in a novel parallel arrangement to increase the flexibility of the equalization. The equalizer was implemented on a programmable system-on-chip (PSOC) using a small number of parallel 4th-order infinite impulse response switchedcapacitor band-pass filters. Because of the interdependency of the required coefficients for the switched capacitors, particle swarm optimization (PSO) was used to determine the optimum values. The response of a through-transmission system using air-coupled capacitive ultrasonic transducers was then equalized to idealized Hamming function or brick-wall frequencydomain responses. In each case, there was excellent agreement between the equalized signals and the theoretical model, and the fidelity of the time-domain response was maintained. The bandwidth and center frequency response of the system were significantly improved. It was also shown that the equalizer could be used on either the transmitter or the receiver, and the system could compensate for the effects of transmitterreceiver misalignment.

  19. Development of micro capacitive accelerometer for subsurface microseismic measurement; Micromachining ni yoru chika danseiha kenshutsu no tame no silicon yoryogata kasokudo sensor no seisaku

    Energy Technology Data Exchange (ETDEWEB)

    Nishizawa, M.; Niitsuma, H.; Esashi, M. [Tohoku University, Sendai (Japan). Faculty of Engineering

    1997-05-27

    A silicon capacitive accelerometer was fabricated to detect subsurface elastic waves by using micromachining technology. Characteristics required for it call for capability of detecting acceleration with amplitudes from 0.1 to 1 gal and flat amplitude characteristics in frequency bands of 10 Hz to several kHz. For the purpose of measuring transition phenomena, linear phase characteristics in the required bands must be guaranteed, cross sensitivity must be small, and resistance to water, pressure and heat is demanded. Sensitivity of the sensor is determined finally by noise level in a detection circuit. The sensor`s minimum detection capability was 40 mgal in the case of the distance between a weight and an electrode being 3 {mu}m. This specification value is a value realizable by the current micromachining technology. Dimensions for the weight and other members were decided with the natural frequency to make band width 2 kHz set to 4 kHz. Completion of the product has not been achieved yet, however, because of a problem that the weight gets stuck on the electrode plate in anode bonding in the assembly process. 7 refs., 5 figs., 1 tab.

  20. 静电驱动电容式微机械陀螺寄生Coriolis力的建模与分析%Modeling and Analysis of Coriolis Offset for Micromachined Gyroscope with Electrostatic Driving and Capacitive Sensing

    Institute of Scientific and Technical Information of China (English)

    莫冰; 郑琦; 刘晓为; 陈斯浩

    2011-01-01

    A micromachined gyroscope with electrostatic driving and capacitive sensing was investigated based on mechanical analysis of Coriolis offset, and an equivalent electrical model of micromachined gyroscope including Coriolis offset was established. This model was simulated and compared with the equivalent electrical model of micromachined gyroscope under ideal conditions. Results indicated that, for micromachined gyroscope with electrostatic driving and capacitive sensing, the Coriolis offset affected neither frequency nor phase of the desired signal, but it may reduce the amplitude of desired signal within 0. 2%o.%在静电驱动电容式微机械陀螺传感器结构的基础上,对寄生Coriolis力进行受力分析,建立了寄生Coriolis力的等效电学模型.比较分析了理想情况下微机械陀螺的等效电学模型以及包含寄生Coriolis力的等效电学模型,结果表明,对于静电驱动电容式微机械陀螺,寄生Coriolis力并不改变有用信号的频率及相位,对其峰峰值的衰减程度小于0.2‰.

  1. Micromachined Integrated Transducers for Ultrasound Imaging

    DEFF Research Database (Denmark)

    la Cour, Mette Funding

    project and collaboration with a lot of partners to improve medical ultrasound imaging. The focus in this part of the project is to design, fabricate and characterize 1D CMUT arrays. Two versions of 1D transducers are made, one at Stanford University and one at DTU. Electrical and acoustical......, but two possible solutions are suggested. Two devices are assembled into probe handles and initial acoustical characterizations are promising. Even though the sensitivity is currently low, images are produced with recognizable features both on phantoms and volunteers. It can be mentioned that a -6 d......The purpose of this project is to develop capacitive micromachined ultrasonic transducers (CMUTs) for medical imaging. Medical ultrasound transducers used today are fabricated using piezoelectric materials and bulk processing. To fabricate transducers capable of delivering a higher imaging...

  2. A Reuse Evaluation for Solar-Cell Silicon Wafers via Shift Revolution and Tool Rotation Using Magnetic Assistance in Ultrasonic Electrochemical Micromachining

    Directory of Open Access Journals (Sweden)

    P. S. Pa

    2013-01-01

    Full Text Available A new reuse fabrication using a tool module with rotation and revolution through a process of magnetic assistance in ultrasonic electrochemical micromachining (UEMM for removal of the surface layers from silicon wafers of solar cells is demonstrated. The target of the proposed reuse fabrication method is to replace the current approach, which uses strong acid and grinding and may damage the physical structure of silicon wafers and pollute to the environment. A precisely engineered clean production approach to removal of surface microstructure layers from silicon wafers is to develop a mass production system for recycling defective or discarded silicon wafers of solar cells that can reduce pollution and cost. The high revolution speed of the shift with the high rotation speed of the designed tool increases the discharge mobility and improves the removal effect associated with the high feed rate of the workpiece. High frequency and high power of ultrasonic with large electrolyte flow rate and high magnetic strengths with a small distance between the two magnets provide a large discharge effect and good removal; only a short period of time is required to remove the epoxy film and Si3N4 layer easily and cleanly.

  3. Passive ultrasonics using sub-Nyquist sampling of high-frequency thermal-mechanical noise.

    Science.gov (United States)

    Sabra, Karim G; Romberg, Justin; Lani, Shane; Degertekin, F Levent

    2014-06-01

    Monolithic integration of capacitive micromachined ultrasonic transducer arrays with low noise complementary metal oxide semiconductor electronics minimizes interconnect parasitics thus allowing the measurement of thermal-mechanical (TM) noise. This enables passive ultrasonics based on cross-correlations of diffuse TM noise to extract coherent ultrasonic waves propagating between receivers. However, synchronous recording of high-frequency TM noise puts stringent requirements on the analog to digital converter's sampling rate. To alleviate this restriction, high-frequency TM noise cross-correlations (12-25 MHz) were estimated instead using compressed measurements of TM noise which could be digitized at a sampling frequency lower than the Nyquist frequency.

  4. An improved circuit noise model in a capacitive micromachined accelerometer%改进的电容式微加速度计中电路噪声模型

    Institute of Scientific and Technical Information of China (English)

    刘云涛; 王颖; 邵雷

    2012-01-01

    为了在加速度传感器设计中准确预测系统电路噪声,优化电路设计参数,建立了改进的电容式微加速度计中的电路噪声模型.详细分析了电荷积分器中的运算放大器噪声、开关热噪声、驱动信号参考电压、寄生电容电阻对系统噪声的影响,分析了相关双采样对热噪声和1/f噪声的影响,建立了微加速度计系统的输入参考噪声公式,所建立的电路噪声模型对各个电路噪声源进行综合考虑,没有忽略噪声源间的相互影响.仿真和测试结果表明:所建立的电路噪声模型能够准确的预测噪声水平,且开关热噪声在高精度微加速度计中严重影响着系统噪声水平.%In order to predict noise performance of a capacitive micromachined accelerometer as well as optimize parameters of circuits, an improved circuit noise model was established. The influences of the operational amplifier noise in the charge integrator, switch thermal noise, reference voltage of driving signals, parasitic capacitance, and dead resistance on the noise performance of the system were analyzed. The effect of correlated double sampling (CDS) on the thermal noise and 1/f noise was analyzed. An input reference noise model for a micromachined accelerometer was established, in which interaction among noise sources was considered. Simulated and tested results indicate that the noise model can predict noise level exactly, and the switch thermal noise plays an important role in high accuracy accelerometers.

  5. Electrochemical Ionization and Analyte Charging in the Array of Micromachined UltraSonic Electrospray (AMUSE) Ion Source.

    Science.gov (United States)

    Forbes, Thomas P; Degertekin, F Levent; Fedorov, Andrei G

    2010-07-01

    Electrochemistry and ion transport in a planar array of mechanically-driven, droplet-based ion sources are investigated using an approximate time scale analysis and in-depth computational simulations. The ion source is modeled as a controlled-current electrolytic cell, in which the piezoelectric transducer electrode, which mechanically drives the charged droplet generation using ultrasonic atomization, also acts as the oxidizing/corroding anode (positive mode). The interplay between advective and diffusive ion transport of electrochemically generated ions is analyzed as a function of the transducer duty cycle and electrode location. A time scale analysis of the relative importance of advective vs. diffusive ion transport provides valuable insight into optimality, from the ionization prospective, of alternative design and operation modes of the ion source operation. A computational model based on the solution of time-averaged, quasi-steady advection-diffusion equations for electroactive species transport is used to substantiate the conclusions of the time scale analysis. The results show that electrochemical ion generation at the piezoelectric transducer electrodes located at the back-side of the ion source reservoir results in poor ionization efficiency due to insufficient time for the charged analyte to diffuse away from the electrode surface to the ejection location, especially at near 100% duty cycle operation. Reducing the duty cycle of droplet/analyte ejection increases the analyte residence time and, in turn, improves ionization efficiency, but at an expense of the reduced device throughput. For applications where this is undesirable, i.e., multiplexed and disposable device configurations, an alternative electrode location is incorporated. By moving the charging electrode to the nozzle surface, the diffusion length scale is greatly reduced, drastically improving ionization efficiency. The ionization efficiency of all operating conditions considered is

  6. A micromachined surface stress sensor with electronic readout

    NARCIS (Netherlands)

    Carlen, E.T.; Weinberg, M.S.; Zapata, A.M.; Borenstein, J.T.

    2008-01-01

    A micromachined surface stress sensor has been fabricated and integrated off chip with a low-noise, differential capacitance, electronic readout circuit. The differential capacitance signal is modulated with a high frequency carrier signal, and the output signal is synchronously demodulated and filt

  7. Micromachined pressure sensors: Review and recent developments

    Energy Technology Data Exchange (ETDEWEB)

    Eaton, W.P.; Smith, J.H. [Sandia National Labs., Albuquerque, NM (United States). Intelligent Micromachines Dept.

    1997-03-01

    Since the discovery of piezoresistivity in silicon in the mid 1950s, silicon-based pressure sensors have been widely produced. Micromachining technology has greatly benefited from the success of the integrated circuits industry, burrowing materials, processes, and toolsets. Because of this, microelectromechanical systems (MEMS) are now poised to capture large segments of existing sensor markets and to catalyze the development of new markets. Given the emerging importance of MEMS, it is instructive to review the history of micromachined pressure sensors, and to examine new developments in the field. Pressure sensors will be the focus of this paper, starting from metal diaphragm sensors with bonded silicon strain gauges, and moving to present developments of surface-micromachined, optical, resonant, and smart pressure sensors. Considerations for diaphragm design will be discussed in detail, as well as additional considerations for capacitive and piezoresistive devices.

  8. Technology trends in high temperature pressure transducers: The impact of micromachining

    Science.gov (United States)

    Mallon, Joseph R., Jr.

    1992-01-01

    This paper discusses the implications of micromachining technology on the development of high temperature pressure transducers. The introduction puts forth the thesis that micromachining will be the technology of choice for the next generation of extended temperature range pressure transducers. The term micromachining is defined, the technology is discussed and examples are presented. Several technologies for high temperature pressure transducers are discussed, including silicon on insulator, capacitive, optical, and vibrating element. Specific conclusions are presented along with recommendations for development of the technology.

  9. Micro-machined resonator oscillator

    Science.gov (United States)

    Koehler, Dale R.; Sniegowski, Jeffry J.; Bivens, Hugh M.; Wessendorf, Kurt O.

    1994-01-01

    A micro-miniature resonator-oscillator is disclosed. Due to the miniaturization of the resonator-oscillator, oscillation frequencies of one MHz and higher are utilized. A thickness-mode quartz resonator housed in a micro-machined silicon package and operated as a "telemetered sensor beacon" that is, a digital, self-powered, remote, parameter measuring-transmitter in the FM-band. The resonator design uses trapped energy principles and temperature dependence methodology through crystal orientation control, with operation in the 20-100 MHz range. High volume batch-processing manufacturing is utilized, with package and resonator assembly at the wafer level. Unique design features include squeeze-film damping for robust vibration and shock performance, capacitive coupling through micro-machined diaphragms allowing resonator excitation at the package exterior, circuit integration and extremely small (0.1 in. square) dimensioning. A family of micro-miniature sensor beacons is also disclosed with widespread applications as bio-medical sensors, vehicle status monitors and high-volume animal identification and health sensors. The sensor family allows measurement of temperatures, chemicals, acceleration and pressure. A microphone and clock realization is also available.

  10. 具有栅结构与静电梳齿驱动的电容式微机械陀螺的仿真、设计与测试%Simulation, Design and Test of Capacitive Micromachined Gyroscope with Bar Structure and Comb-Drive Electrostatic Structure

    Institute of Scientific and Technical Information of China (English)

    谭秋林; 石云波; 张文栋; 刘俊; 张琼; 熊继军

    2011-01-01

    The capacitive gyroscope is a kind of vibratory gyroscope. Compared with the conventional gyroscope, the gyroscope has many merits because of its artffactitious particularity. The capacitive gyroscope has been widely used in many fields. In order to improve the measurement precision of the gyroscope, a design method of mieromachined gyroscope based on comb-drive electrostatic structure and capacitive detection of bar structure was presented in this paper. The operating principle of the micromachined gyroscope was analyzed in detail. The structural simulation and modal analysis of the gyroscope were developed by utilizing ANSYS soft. The simulation results are close to those of the theoretical calculation.The structure was designed and processed by technological processes. After processing and packaging, the gyroscope was tested. Experimental results show that the measured resonant frequency is 4. 06 kHz in driving mode, and the sensitivity is 0.027 9 V/(°/s).%电容式陀螺仪是一种振动式陀螺仪,由于加工的特殊性使其具有了传统的陀螺无法比拟的优点,从而拓宽了其应用领域.为了提高陀螺仪的检测精度,本文提出了一种静电梳齿驱动、栅结构的电容式检测的微机械陀螺仪的设计方法,并分析了其工作原理.运用ANSYS软件对陀螺结构进行了仿真和模态分析,仿真结果与理论计算结果相接近.所设计的陀螺结构采用体硅标准工艺方法进行了设计,并对其进行了流片加工和封装,最终得到了电容式微机械陀螺仪.实验测试的结果表明,陀螺驱动模态的固有频率为4.06kHz,灵敏度为0.027 9 v/((°)s-1).

  11. Micro-machining.

    Science.gov (United States)

    Brinksmeier, Ekkard; Preuss, Werner

    2012-08-28

    Manipulating bulk material at the atomic level is considered to be the domain of physics, chemistry and nanotechnology. However, precision engineering, especially micro-machining, has become a powerful tool for controlling the surface properties and sub-surface integrity of the optical, electronic and mechanical functional parts in a regime where continuum mechanics is left behind and the quantum nature of matter comes into play. The surprising subtlety of micro-machining results from the extraordinary precision of tools, machines and controls expanding into the nanometre range-a hundred times more precise than the wavelength of light. In this paper, we will outline the development of precision engineering, highlight modern achievements of ultra-precision machining and discuss the necessity of a deeper physical understanding of micro-machining.

  12. Micromachined Ultrasonic Transducers for 3-D Imaging

    DEFF Research Database (Denmark)

    Christiansen, Thomas Lehrmann

    Real-time ultrasound imaging is a widely used technique in medical diagnostics. Recently, ultrasound systems offering real-time imaging in 3-D has emerged. However, the high complexity of the transducer probes and the considerable increase in data to be processed compared to conventional 2-D...... ultrasound imaging results in expensive systems, which limits the more wide-spread use and clinical development of volumetric ultrasound. The main goal of this thesis is to demonstrate new transducer technologies that can achieve real-time volumetric ultrasound imaging without the complexity and cost...... of state-of-the-art 3-D ultrasound systems. The focus is on row-column addressed transducer arrays. This previously sparsely investigated addressing scheme offers a highly reduced number of transducer elements, resulting in reduced transducer manufacturing costs and data processing. To produce...

  13. Micromachined Artificial Haircell

    Science.gov (United States)

    Liu, Chang (Inventor); Engel, Jonathan (Inventor); Chen, Nannan (Inventor); Chen, Jack (Inventor)

    2010-01-01

    A micromachined artificial sensor comprises a support coupled to and movable with respect to a substrate. A polymer, high-aspect ratio cilia-like structure is disposed on and extends out-of-plane from the support. A strain detector is disposed with respect to the support to detect movement of the support.

  14. Micromachined Fluid Inertial Sensors

    Directory of Open Access Journals (Sweden)

    Shiqiang Liu

    2017-02-01

    Full Text Available Micromachined fluid inertial sensors are an important class of inertial sensors, which mainly includes thermal accelerometers and fluid gyroscopes, which have now been developed since the end of the last century for about 20 years. Compared with conventional silicon or quartz inertial sensors, the fluid inertial sensors use a fluid instead of a solid proof mass as the moving and sensitive element, and thus offer advantages of simple structures, low cost, high shock resistance, and large measurement ranges while the sensitivity and bandwidth are not competitive. Many studies and various designs have been reported in the past two decades. This review firstly introduces the working principles of fluid inertial sensors, followed by the relevant research developments. The micromachined thermal accelerometers based on thermal convection have developed maturely and become commercialized. However, the micromachined fluid gyroscopes, which are based on jet flow or thermal flow, are less mature. The key issues and technologies of the thermal accelerometers, mainly including bandwidth, temperature compensation, monolithic integration of tri-axis accelerometers and strategies for high production yields are also summarized and discussed. For the micromachined fluid gyroscopes, improving integration and sensitivity, reducing thermal errors and cross coupling errors are the issues of most concern.

  15. Micromachined ultrasound transducers with improved coupling factors from a CMOS compatible process

    Science.gov (United States)

    Eccardt; Niederer

    2000-03-01

    For medical high frequency acoustic imaging purposes the reduction in size of a single transducer element for one-dimensional and even more for two-dimensional arrays is more and more limited by fabrication and cabling technology. In the fields of industrial distance measurement and simple object recognition low cost phased arrays are lacking. Both problems can be solved with micromachined ultrasound transducers (MUTs). A single transducer is made of a large number of microscopic elements. Because of the array structure of these transducers, groups of elements can be built up and used as a phased array. By integrating parts of the sensor electronics on chip, the cabling effort for arrays can be reduced markedly. In contrast to standard ultrasonic technology, which is based on massive thickness resonators, vibrating membranes are the radiating elements of the MUTs. New micromachining technologies have emerged, allowing a highly reproducible fabrication of electrostatically driven membranes with gap heights below 500 nm. A microelectronic BiCMOS process was extended for surface micromechanics (T. Scheiter et al., Proceedings 11th European Conference on Solid-State Transducers, Warsaw, Vol. 3, 1997, pp. 1595-1598). Additional process steps were included for the realization of the membranes which form sealed cavities with the underlying substrate. Membrane and substrate are the opposite electrodes of a capacitive transducer. The transducers can be integrated monolithically on one chip together with the driving, preamplifying and multiplexing circuitry, thus reducing parasitic capacities and noise level significantly. Owing to their low mass the transducers are very well matched to fluid loads, resulting in a very high bandwidth of 50-100% (C. Eccardt et al., Proceedings Ultrasonics Symposium, San Antonio, Vol. 2, 1996, pp. 959-962; P.C. Eccardt et al., Proceedings of the 1997 Ultrasonics Symposium, Toronto, Vol. 2, 1997, pp. 1609-1618). In the following it is shown how

  16. On-line detection of power ultrasonic transducer clamping capacitance%功率超声换能器夹持电容的在线检测的研究

    Institute of Scientific and Technical Information of China (English)

    朱武; 赵空勤; 金长善; 蔡鹤皋

    2001-01-01

    Presents the simple but highly reliable on-line detection of ultrasonic transducer clamping capacitance based on the impedance circuit model constructed through the impedance characteristics of the ultrasonic transducer under triple harmonics, and concludes from experimental results that this method can be used to effectively detect the variation of clamping capacitance while the transducer is operating, and the matching inductance can be dynamically regulated according to the results of detection, and dynamic matching can therefore be achieved in the real sense at the end of the transducer to improve the overall performance of the whole system.%为了解决大功率超声应用的换能器电端匹配问题,分析了超声波换能器在谐振频率三次谐波下的阻抗特性,给出了超声换能器三次谐波下的阻抗电路模型.并根据阻抗电路模型建立了对超声换能器的夹持电容实现在线检测简单、可靠性高的方法,实验证明该方法有效的.该方法可以在换能器工作过程中随时检测夹持电容的变化,根据检测结果对匹配电感进行动态调整,实现真正意义上的换能器电端的动态匹配,从而大大改善匹配质量,提高系统的工作性能.

  17. Micromachined Amperometric Nitrate Sensor

    OpenAIRE

    Dohyun Kim; Ira Goldberg; Jack Judy

    2003-01-01

    A nitrate-sensing system that consists of a micromachined sensor substrate, nitrate-permeable membrane, integrated microfluidic channels, and standard fluidic connectors has been designed, fabricated, assembled, and tested. Our microsensor was designed for in-situ monitoring of nitrate concentrations in ground water. A silver electrode was patterned for amperometric nitrate detection. An electrochemically oxidized silver electrode was used as a reference electrode. Microfluidic channels were ...

  18. Micromachined Precision Inertial Instruments

    Science.gov (United States)

    2003-11-01

    and vacuum packaging techniques to achieve degree-per-hour inertial micro-gyroscopes. A single-wafer, all-silicon, high aspect-ratio p...Although vacuum packaging substantially reduces the mechanical noise of a surface micromachined accelerometer and lowers the output noise floor...it is desirable to operate sensors in atmosphere since vacuum packaging is not cost effective [15]. Figure 10: Performance improvements for In

  19. Micro coriolis mass flow sensor with integrated capacitive readout

    NARCIS (Netherlands)

    Haneveld, J.; Lammerink, T.S.J.; Boer, de M.J.; Wiegerink, R.J.

    2009-01-01

    We have realized a micromachined micro Coriolis mass flow sensor with integrated capacitive readout to detect the extremely small Coriolis vibration of the sensor tube. A special comb-like detection electrode design eliminates the need for multiple metal layers and sacrificial layer etching methods.

  20. Trends in laser micromachining

    Science.gov (United States)

    Gaebler, Frank; van Nunen, Joris; Held, Andrew

    2016-03-01

    Laser Micromachining is well established in industry. Depending on the application lasers with pulse length from μseconds to femtoseconds and wavelengths from 1064nm and its harmonics up to 5μm or 10.6μm are used. Ultrafast laser machining using pulses with pico or femtosecond duration pulses is gaining traction, as it offers very precise processing of materials with low thermal impact. Large-scale industrial ultrafast laser applications show that the market can be divided into various sub segments. One set of applications demand low power around 10W, compact footprint and are extremely sensitive to the laser price whilst still demanding 10ps or shorter laser pulses. A second set of applications are very power hungry and only become economically feasible for large scale deployments at power levels in the 100+W class. There is also a growing demand for applications requiring fs-laser pulses. In our presentation we would like to describe these sub segments by using selected applications from the automotive and electronics industry e.g. drilling of gas/diesel injection nozzles, dicing of LED substrates. We close the presentation with an outlook to micromachining applications e.g. glass cutting and foil processing with unique new CO lasers emitting 5μm laser wavelength.

  1. Micromachining using femtosecond lasers

    Science.gov (United States)

    Toenshoff, Hans K.; Ostendorf, Andreas; Nolte, Stefan; Korte, Frank; Bauer, Thorsten

    2000-11-01

    Femtosecond laser systems have been proved to be effective tools for high precision micro-machining. Almost all solid materials can be processed with high precision. The dependence on material properties like thermal conductivity, transparency, heat- or shock sensitivity is strongly reduced and no significant influence on the remaining bulk material is observed after ablation using femtosecond laser pulses. In contrast to conventional laser processing, where the achievable precision is reduced due to a formed liquid phase causing burr formation, the achievable precision using femtosecond pulses is only limited by the diffraction of the used optics. Potential applications of this technique, aincluding the structuring of biodegradable polymers for cardiovascular implants, so-called stents, as well as high precision machining of transparent materials are presented.

  2. Micromachining with Nanostructured Cutting Tools

    CERN Document Server

    Jackson, Mark J

    2013-01-01

    The purpose of the brief is to explain how nanostructured tools can be used to machine materials at the microscale.  The aims of the brief are to explain to readers how to apply nanostructured tools to micromachining applications. This book describes the application of nanostructured tools to machining engineering materials and includes methods for calculating basic features of micromachining. It explains the nature of contact between tools and work pieces to build a solid understanding of how nanostructured tools are made.

  3. Analysis of small deflection touch mode behavior in capacitive pressure sensors

    DEFF Research Database (Denmark)

    Fragiacomo, Giulio; Ansbæk, Thor; Pedersen, Thomas;

    2010-01-01

    mode), touch point pressure and parasitic capacitance. Therefore, the desired device can be designed without using finite element modeling (FEM). This reduces the effort needed to design a micromachined TMCPS. Finally, the model has been compared with a micromachined TMCPS showing an excellent...... such that geometrical scalings are revealed. We show that, in the case of linear elastic behavior, a simple analytical model can be found for a touch mode capacitive pressure sensor (TMCPS). With this model it is possible to readily evaluate the main features of a TMCPS such as: sensitivity (both in normal and touch...

  4. Micromachined dual input axis rate gyroscope

    Science.gov (United States)

    Juneau, Thor Nelson

    The need for inexpensive yet reliable angular rate sensors in fields ranging from automotive to consumer electronics has motivated prolific micromachined rate gyroscope research. The vast majority of research has focused on single input axis rate gyroscopes based upon either translational resonance, such as tuning forks, or structural mode resonance, such as vibrating rings. However, this work presents a novel, contrasting approach based on angular resonance of a rotating rigid rotor suspended by torsional springs. The inherent symmetry of the circular design allows angular rate measurement about two axes simultaneously, hence the name micromachined dual-axis rate gyroscope. The underlying theory of operation, mechanical structure design optimization, electrical interface circuitry, and signal processing are described in detail. Several operational versions were fabricated using two different fully integrated surface micromachining processes as proof of concept. The heart of the dual-axis rate gyroscope is a ˜2 mum thick polysilicon disk or rotor suspended above the substrate by a four beam suspension. When this rotor in driven into angular oscillation about the axis perpendicular to the substrate, a rotation rate about the two axes parallel to the substrate invokes an out of plane rotor tilting motion due to Coriolis acceleration. This tilting motion is capacitively measured and on board integrated signal processing provides two output voltages proportional to angular rate input about the two axes parallel to the substrate. The design process begins with the derivation of gyroscopic dynamics. The equations suggest that tuning sense mode frequencies to the drive oscillation frequency can vastly increase mechanical sensitivity. Hence the supporting four beam suspension is designed such that electrostatic tuning can match modes despite process variations. The electrostatic tuning range is limited only by rotor collapse to the substrate when tuning-voltage induced

  5. Laser Micromachining of Glass, Silicon, and Ceramics

    Directory of Open Access Journals (Sweden)

    L. Rihakova

    2015-01-01

    Full Text Available A brief review is focused on laser micromachining of materials. Micromachining of materials is highly widespread method used in many industries, including semiconductors, electronic, medical, and automotive industries, communication, and aerospace. This method is a promising tool for material processing with micron and submicron resolution. In this paper micromachining of glass, silicon, and ceramics is considered. Interaction of these materials with laser radiation and recent research held on laser material treatment is provided.

  6. Laser Micromachining of Glass, Silicon, and Ceramics

    OpenAIRE

    Rihakova, L.; Chmelickova, H.

    2015-01-01

    A brief review is focused on laser micromachining of materials. Micromachining of materials is highly widespread method used in many industries, including semiconductors, electronic, medical, and automotive industries, communication, and aerospace. This method is a promising tool for material processing with micron and submicron resolution. In this paper micromachining of glass, silicon, and ceramics is considered. Interaction of these materials with laser radiation and recent research held o...

  7. Micromachined magnetohydrodynamic actuators and sensors

    Science.gov (United States)

    Lee, Abraham P.; Lemoff, Asuncion V.

    2000-01-01

    A magnetohydrodynamic (MHD) micropump and microsensor which utilizes micromachining to integrate the electrodes with microchannels and includes a magnet for producing magnetic fields perpendicular to both the electrical current direction and the fluid flow direction. The magnet can also be micromachined and integrated with the micropump using existing technology. The MHD micropump, for example, can generate continuous, reversible flow, with readily controllable flow rates. The flow can be reversed by either reversing the electrical current flow or reversing the magnetic field. By mismatching the electrodes, a swirling vortex flow can be generated for potential mixing applications. No moving parts are necessary and the dead volume is minimal. The micropumps can be placed at any position in a fluidic circuit and a combination of micropumps can generate fluidic plugs and valves.

  8. Review of polymer MEMS micromachining

    Science.gov (United States)

    Kim, Brian J.; Meng, Ellis

    2016-01-01

    The development of polymer micromachining technologies that complement traditional silicon approaches has enabled the broadening of microelectromechanical systems (MEMS) applications. Polymeric materials feature a diverse set of properties not present in traditional microfabrication materials. The investigation and development of these materials have opened the door to alternative and potentially more cost effective manufacturing options to produce highly flexible structures and substrates with tailorable bulk and surface properties. As a broad review of the progress of polymers within MEMS, major and recent developments in polymer micromachining are presented here, including deposition, removal, and release techniques for three widely used MEMS polymer materials, namely SU-8, polyimide, and Parylene C. The application of these techniques to create devices having flexible substrates and novel polymer structural elements for biomedical MEMS (bioMEMS) is also reviewed.

  9. Distance effects in electrochemical micromachining

    Science.gov (United States)

    Xu, Lizhong; Pan, Yue; Zhao, Chuanjun

    2016-09-01

    Considering exponential dependence of currents on double-layer voltage and the feedback effect of the electrolyte resistance, a distance effect in electrochemical micromachining is found, namely that both time constant and double-layer voltage depend on the separation of electrodes. The double-layer voltage is the real voltage used in processing. Under DC voltage, the apparent voltages between two electrodes are constant for different separations, but the real voltages change with the separations. Small separations exert substantial effects on the real voltages. Accordingly, a DC-voltage small-separation electrochemical micromachining technique was proposed. The double-layer voltage drops sharply as the small separation increases. Thus, the electrochemical reactions are confined to electrode regions in very close proximity even under DC voltage. The machining precision can be significantly enhanced by reducing the voltage and separation between electrodes. With this technique, the machining of conducting materials with submicrometre precision was achieved.

  10. Distance effects in electrochemical micromachining

    OpenAIRE

    2016-01-01

    Considering exponential dependence of currents on double-layer voltage and the feedback effect of the electrolyte resistance, a distance effect in electrochemical micromachining is found, namely that both time constant and double-layer voltage depend on the separation of electrodes. The double-layer voltage is the real voltage used in processing. Under DC voltage, the apparent voltages between two electrodes are constant for different separations, but the real voltages change with the separat...

  11. 超声法合成花状 Ni(OH)2微球及其电容特性分析的实验设计%Ultrasonic synthesis of Ni(OH)2 flower-like microspheres and their capacitive performance analysis of experimental design

    Institute of Scientific and Technical Information of China (English)

    龚良玉; 康武魁; 吴锦淑; 杨洲; 冷晓; 韩德隆; 陈萍

    2014-01-01

    以氯化镍为镍盐来源,尿素为沉淀剂,采用超声法快速地合成了由纳米片组装而成的花状 Ni(OH)2微球。探讨了超声时间和功率、反应物配比等因素对 Ni(OH)2电化学性能的影响。结果表明,当超声时间为30 min,超声功率为500 W,镍盐和尿素的配比为1/4时,所得 Ni(OH)2样品的电容性能最佳,10 mA 下恒流充放电时,其放电比电容量高达1906 F/ g。%Flower-like Ni(OH)2 microspheres assembled from several dozens of nanosheets were success-fully synthesized through a rapid ultrasonic irradiation process in a very simple system composed only of water,NiCl2 and CO(NH2 )2 . The effects of the ultrasonic time and power,the reactants ratio on electro-chemical properties were discussed. The result showed that the maximum specific capacitance value of 1 906 F/ g at 10 mA could be achieved,the Ni(OH)2 flower-like microspheres obtained at ultrasonic time of 30 min,ultrasonic power of 500 W and the NiCl2 / CO(NH2 )2 ratio of 1 / 4.

  12. Efficient Sonochemistry through Microbubbles Generated with Micromachined Surfaces

    CERN Document Server

    Rivas, David Fernandez; Zijlstra, Aaldert G; Lohse, Detlef; Gardeniers, Han J G E; 10.1002/anie.201005533

    2012-01-01

    Sonochemical reactors are used in water treatment, the synthesis of fine chemicals, pharmaceutics and others. The low efficiency of sonoreactors have prevented its massive usage at industrial scales. Controlling the appearance of bubbles in place and time is the most limiting factor. A novel type of sonochemical reactor was designed making use of micro-fabrication techniques to control the nucleation sites of micro-bubbles. The efficiency was increased first by locating the nucleation sites in the most active region of a micro-chamber; additionally the desired chemical effect was significantly higher at the same powers than when not controlled. Silicon substrates were micromachined with "artificial nucleation sites" or pits, and placed at the bottom of the micro-chamber. The pits entrap gas which, upon ultrasonic excitation, sheds off a stream of microbubbles. The gas content of the pits is not depleted but is replenished by diffusion and the emission of microbubbles can continue for hours.

  13. Micro-machined calorimetric biosensors

    Science.gov (United States)

    Doktycz, Mitchel J.; Britton, Jr., Charles L.; Smith, Stephen F.; Oden, Patrick I.; Bryan, William L.; Moore, James A.; Thundat, Thomas G.; Warmack, Robert J.

    2002-01-01

    A method and apparatus are provided for detecting and monitoring micro-volumetric enthalpic changes caused by molecular reactions. Micro-machining techniques are used to create very small thermally isolated masses incorporating temperature-sensitive circuitry. The thermally isolated masses are provided with a molecular layer or coating, and the temperature-sensitive circuitry provides an indication when the molecules of the coating are involved in an enthalpic reaction. The thermally isolated masses may be provided singly or in arrays and, in the latter case, the molecular coatings may differ to provide qualitative and/or quantitative assays of a substance.

  14. Digital Readout System for Micromachined Gyroscope and Analysis for its Demodulation Algorithm

    Institute of Scientific and Technical Information of China (English)

    ZHOU Bin; GAO Zhong-yu; CHEN Huai; ZHANG Rong; CHEN Zhi-yong

    2006-01-01

    A new digital readout system for micromachined gyroscope has been proposed to implement flexible parameter adiustment,improve the control performance of gyroscope,and make error compensation.By digitalizing the output of the gyroscope,this system uses a floatingtype digital signal processor(DSP)to process the signal demodulation and achieve the feedback conffol of the gyroscope.Therefore.the small change of capacitance in the micromachined gyroscope Can be detected.A new demodulation algorithm of least mean square demodulation(LMSD)has been developed inside DSP Simulation and measurement results show that LMSD Can improve 29%of the noise performance compared with the typical multiplication method.In air pressure.a kind ofvibration-wheel micmmachined over the 100-Hz bandwidth by using this digital readout technology.

  15. ON-LINE SELF-TESTING FOR MICRO-MACHINED GYROSCOPES

    Institute of Scientific and Technical Information of China (English)

    GAISSERAlexander; GAOZhong-yu; ZHANGRong; CHENZhi-yong; ZHOUBin

    2005-01-01

    An on line self-testing for Coriolis vibratory gyroscopes (CVGs) is realized according to a digital readout electronics for capacitive sensors and micro-machined angular rate sensors. By applying some additional signals to the micro machined structure, the actual noise performance (<0.1°/s) is not worsened. The running of the primary and the secondary oscillators of CVGs is verified by self-testing. Compared with other methods, the device needs not to check the functionality. In this new approach the on-line testing is conducted at any time without disturbing the normal operational mode. Based on the approach the performance of the micro machined gyroscope can be improved and a secure availability of the functionality of the micro-machined angular rate sensor is guaranteed. Furthermore, the error signal is generated when the sensor works incorrectly.

  16. Integrated mold/surface-micromachining process

    Energy Technology Data Exchange (ETDEWEB)

    Barron, C.C.; Fleming, J.G.; Montague, S.; Sniegowski, J.J.; Hetherington, D.L.

    1996-03-01

    We detail a new monolithically integrated silicon mold/surface-micromachining process which makes possible the fabrication of stiff, high-aspect-ratio micromachined structures integrated with finely detailed, compliant structures. An important example, which we use here as our process demonstration vehicle, is that of an accelerometer with a large proof mass and compliant suspension. The proof mass is formed by etching a mold into the silicon substrate, lining the mold with oxide, filling it with mechanical polysilicon, and then planarizing back to the level of the substrate. The resulting molded structure is recessed into the substrate, forming a planar surface ideal for subsequent processing. We then add surface-micromachined springs and sense contacts. The principal advantage of this new monolithically integrated mold/surface-micromachining process is that it decouples the design of the different sections of the device: In the case of a sensitive accelerometer, it allows us to optimize independently the proof mass, which needs to be as large, stiff, and heavy as possible, and the suspension, which needs to be as delicate and compliant as possible. The fact that the high-aspect-ratio section of the device is embedded in the substrate enables the monolithic integration of high-aspect-ratio parts with surface-micromachined mechanical parts, and, in the future, also electronics. We anticipate that such an integrated mold/surface micromachining/electronics process will offer versatile high-aspect-ratio micromachined structures that can be batch-fabricated and monolithically integrated into complex microelectromechanical systems.

  17. Micromachined Thermal Flow Sensors—A Review

    Directory of Open Access Journals (Sweden)

    Jonathan T. W. Kuo

    2012-07-01

    Full Text Available Microfabrication has greatly matured and proliferated in use amongst many disciplines. There has been great interest in micromachined flow sensors due to the benefits of miniaturization: low cost, small device footprint, low power consumption, greater sensitivity, integration with on-chip circuitry, etc. This paper reviews the theory of thermal flow sensing and the different configurations and operation modes available. Material properties relevant to micromachined thermal flow sensing and selection criteria are also presented. Finally, recent applications of micromachined thermal flow sensors are presented. Detailed tables of the reviewed devices are included.

  18. Micromachining process – current situation and challenges

    Directory of Open Access Journals (Sweden)

    Lalakiya Meet Rajeshkumar

    2015-01-01

    Full Text Available The rapid progress in the scientific innovations and the hunt for the renewable energy increases the urge for producing the bio electronic products, solar cells, bio batteries, nano robots, MEMS, blood less surgical tools which can be possible with the aid of the micromachining. This article helps us to understand the evolution and the challenges faced by the micromachining process. Micro machining is an enabling technology that facilitates component miniaturization and improved performance characteristics. Growing demand for less weight, high accuracy, high precision, meagre lead time, reduced batch size, less human interference are the key drivers for the micromachining than the conventional machining process.

  19. Review of laser micromachining in contract manufacturing

    Science.gov (United States)

    Ogura, Glenn; Gu, Bo

    1998-06-01

    This paper explores the wide range of laser micromachining applications used in contract manufacturing. Contract manufacturing is used in several key industries such as microelectronics packaging, semiconductor, data storage, medical devices, communications, peripherals, automobiles and aerospace. Material types includes plastics, metals, ceramics, inorganics and composites. However laser micromachining is just one available technology for micromachining and other methods will be reviewed. Contract manufacturing offers two important glimpses of the future. Firstly prototype work for new applications often beings in contract manufacturing. Secondly, contract manufacturing can be an economic springboard to allow laser systems to be installed in a production environment.

  20. Design and Simulation of a New Decoupled Micromachined Gyroscope

    Energy Technology Data Exchange (ETDEWEB)

    Sharaf, Abdelhameed [NCRRT, EAEA, 3 Ahmed Elzomer Street, Nasr City, Cairo (Egypt); STRC, AUC, 113 Kasr El Eini Street, 11215, Cairo (Egypt); Sedky, Sherif [STRC, AUC, 113 Kasr El Eini Street, 11215, Cairo (Egypt); Physics Department, AUC, 113 Kasr El Eini Street, 11215, Cairo (Egypt); Habib, S E-D [Electronics and Communication Department, Faculty of Engineering, Cairo University, 12613, Giza (Egypt)

    2006-04-01

    This paper reports on a new decoupled micromachined gyroscope. The proposed sensor is a dual mass type, electrostatically driven to primary mode oscillation and senses, capacitively, the output signal. Full decoupling between drive and sense modes minimizes the mechanical crosstalk. Three different designs are introduced in this work. Drive and sense amplitudes, mechanical and electrical sensitivities, quality factors and approximate bandwidths are extracted analytically and the results are confirmed using finite element analysis. The first design shows drive and sense modes resonance frequencies of 4077 Hz and 4081 Hz respectively; with a frequency mismatch lower than 0.1%. The drive and sense capacitance are 0.213 pF and 0.142 pF respectively. The mechanical and electrical sensitivities are 0.011 {mu}m/ ({sup 0}/s) and 2.75 mV/ ({sup 0}/s) respectively. The third design shows significantly improved mechanical and electrical sensitivities of 0.027 {mu}m/ ({sup 0}/s) and 6.85 mV/ ({sup 0}/s) respectively.

  1. Optical micromachines for photonic networks

    Science.gov (United States)

    Katagiri, Yoshitada

    2001-10-01

    The optical micromachines controlling the light in spatial and wavelength domains are based on the micro- optomechatronics which handles small objects in micrometers and covers the fields from monolithic fabrication and control techniques. Their advantageous features include quick response, high mechanical stability, and low driving power because of the small inertia effects. A wide variety of functions such as wavelength tuning and optical path switching has been realized. This paper describes typical applications corresponding to these functions and their possible implementations: optical manipulation for small optical components based on momentum transfer of photons, micro lenses fabricated monolithically on a substrate for optical integration circuits, tunable filters with moving mirrors driven by the electrostatic force fro pulse shaping, and optical switches based on thermo capillary for cross connect or add/drop multiplexing operations in network systems. These applications are useful for next-generation photonic reconfigurable networks.

  2. Soft micromachines with programmable motility and morphology

    Science.gov (United States)

    Huang, Hen-Wei; Sakar, Mahmut Selman; Petruska, Andrew J.; Pané, Salvador; Nelson, Bradley J.

    2016-07-01

    Nature provides a wide range of inspiration for building mobile micromachines that can navigate through confined heterogenous environments and perform minimally invasive environmental and biomedical operations. For example, microstructures fabricated in the form of bacterial or eukaryotic flagella can act as artificial microswimmers. Due to limitations in their design and material properties, these simple micromachines lack multifunctionality, effective addressability and manoeuvrability in complex environments. Here we develop an origami-inspired rapid prototyping process for building self-folding, magnetically powered micromachines with complex body plans, reconfigurable shape and controllable motility. Selective reprogramming of the mechanical design and magnetic anisotropy of body parts dynamically modulates the swimming characteristics of the micromachines. We find that tail and body morphologies together determine swimming efficiency and, unlike for rigid swimmers, the choice of magnetic field can subtly change the motility of soft microswimmers.

  3. Surface-micromachined 1MHz oscillator with low-noise Pierce configuration

    Energy Technology Data Exchange (ETDEWEB)

    Roessig, T.A.; Howe, R.T.; Pisano, A.P. [Univ. of California, Berkeley, CA (United States); Smith, J.H. [Sandia National Labs., Albuquerque, NM (United States)

    1998-06-01

    A prototype high frequency tuning fork oscillator has been fabricated and tested in an integrated surface micromachining technology. The amplifier circuitry uses a capacitive current detection method, which offers superior noise performance over previous resistive methods. The prototype device has an output frequency of 1.022 MHz and exhibits a noise floor of {minus}88 dBc/Hz at a distance of 500 Hz from the carrier. The dominant source of frequency instability is the nonlinearity introduced by the use of parallel plate actuation.

  4. Passive wireless ultrasonic transducer systems

    Science.gov (United States)

    Zhong, C. H.; Croxford, A. J.; Wilcox, P. D.

    2014-02-01

    Inductive coupling and capacitive coupling both offer simple solutions to wirelessly probe ultrasonic transducers. This paper investigates the theory and feasibility of such system in the context of non-destructive evaluation (NDE) applications. Firstly, the physical principles and construction of an inductively coupled transducer system (ICTS) and a capacitively coupled transducer system (CCTS) are introduced. Then the development of a transmission line model with the measured impedance of a bonded piezoelectric ceramic disc representing a sensor attached to an arbitrary solid substrate for both systems is described. The models are validated experimentally. Several applications of CCTS are presented, such CCTS for the underwater and through-composite testing.

  5. Demonstration of superconducting micromachined cavities

    Energy Technology Data Exchange (ETDEWEB)

    Brecht, T., E-mail: teresa.brecht@yale.edu; Reagor, M.; Chu, Y.; Pfaff, W.; Wang, C.; Frunzio, L.; Devoret, M. H.; Schoelkopf, R. J. [Department of Applied Physics, Yale University, New Haven, Connecticut 06511 (United States)

    2015-11-09

    Superconducting enclosures will be key components of scalable quantum computing devices based on circuit quantum electrodynamics. Within a densely integrated device, they can protect qubits from noise and serve as quantum memory units. Whether constructed by machining bulk pieces of metal or microfabricating wafers, 3D enclosures are typically assembled from two or more parts. The resulting seams potentially dissipate crossing currents and limit performance. In this letter, we present measured quality factors of superconducting cavity resonators of several materials, dimensions, and seam locations. We observe that superconducting indium can be a low-loss RF conductor and form low-loss seams. Leveraging this, we create a superconducting micromachined resonator with indium that has a quality factor of two million, despite a greatly reduced mode volume. Inter-layer coupling to this type of resonator is achieved by an aperture located under a planar transmission line. The described techniques demonstrate a proof-of-principle for multilayer microwave integrated quantum circuits for scalable quantum computing.

  6. Physics-based signal processing algorithms for micromachined cantilever arrays

    Science.gov (United States)

    Candy, James V; Clague, David S; Lee, Christopher L; Rudd, Robert E; Burnham, Alan K; Tringe, Joseph W

    2013-11-19

    A method of using physics-based signal processing algorithms for micromachined cantilever arrays. The methods utilize deflection of a micromachined cantilever that represents the chemical, biological, or physical element being detected. One embodiment of the method comprises the steps of modeling the deflection of the micromachined cantilever producing a deflection model, sensing the deflection of the micromachined cantilever and producing a signal representing the deflection, and comparing the signal representing the deflection with the deflection model.

  7. Silicon Micromachining for Terahertz Component Development

    Science.gov (United States)

    Chattopadhyay, Goutam; Reck, Theodore J.; Jung-Kubiak, Cecile; Siles, Jose V.; Lee, Choonsup; Lin, Robert; Mehdi, Imran

    2013-01-01

    Waveguide component technology at terahertz frequencies has come of age in recent years. Essential components such as ortho-mode transducers (OMT), quadrature hybrids, filters, and others for high performance system development were either impossible to build or too difficult to fabricate with traditional machining techniques. With micromachining of silicon wafers coated with sputtered gold it is now possible to fabricate and test these waveguide components. Using a highly optimized Deep Reactive Ion Etching (DRIE) process, we are now able to fabricate silicon micromachined waveguide structures working beyond 1 THz. In this paper, we describe in detail our approach of design, fabrication, and measurement of silicon micromachined waveguide components and report the results of a 1 THz canonical E-plane filter.

  8. Aviation-oriented Micromachining Technology-Micro-ECM in Pure Water

    Institute of Scientific and Technical Information of China (English)

    Bao Huaiqian; Xu Jiawen; Li Ying

    2008-01-01

    This article proposes a precise and ecofriendly micromachining technology for aerospace application called electrochemical machining in pure water (PW-ECM). On the basis of the principles of water dissociation, a series of test setups and tests are devised and performed under different conditions. These tests explain the need for technological conditions realizing PW-ECM, and further explore the technological principles. The results from the tests demonstrate a successful removal of electrolytic slime by means of ultrasonic vibration of the workpiece. To ensure the stability and reliability of PW-ECM process, a new combined rnachining method of PW-ECM assisted with ultrasonic vibration (PW-ECM/USV) is devised. Trilateral and square cavities and holes as well as a group of English alphabets are worked out on a stainless steel plate. It is eonfirmed that PW-ECM will be probably an efficient new aviation precision machining method.

  9. Fundamental mechanisms of micromachine reliability

    Energy Technology Data Exchange (ETDEWEB)

    DE BOER,MAARTEN P.; SNIEGOWSKI,JEFFRY J.; KNAPP,JAMES A.; REDMOND,JAMES M.; MICHALSKE,TERRY A.; MAYER,THOMAS K.

    2000-01-01

    Due to extreme surface to volume ratios, adhesion and friction are critical properties for reliability of Microelectromechanical Systems (MEMS), but are not well understood. In this LDRD the authors established test structures, metrology and numerical modeling to conduct studies on adhesion and friction in MEMS. They then concentrated on measuring the effect of environment on MEMS adhesion. Polycrystalline silicon (polysilicon) is the primary material of interest in MEMS because of its integrated circuit process compatibility, low stress, high strength and conformal deposition nature. A plethora of useful micromachined device concepts have been demonstrated using Sandia National Laboratories' sophisticated in-house capabilities. One drawback to polysilicon is that in air the surface oxidizes, is high energy and is hydrophilic (i.e., it wets easily). This can lead to catastrophic failure because surface forces can cause MEMS parts that are brought into contact to adhere rather than perform their intended function. A fundamental concern is how environmental constituents such as water will affect adhesion energies in MEMS. The authors first demonstrated an accurate method to measure adhesion as reported in Chapter 1. In Chapter 2 through 5, they then studied the effect of water on adhesion depending on the surface condition (hydrophilic or hydrophobic). As described in Chapter 2, they find that adhesion energy of hydrophilic MEMS surfaces is high and increases exponentially with relative humidity (RH). Surface roughness is the controlling mechanism for this relationship. Adhesion can be reduced by several orders of magnitude by silane coupling agents applied via solution processing. They decrease the surface energy and render the surface hydrophobic (i.e. does not wet easily). However, only a molecular monolayer coats the surface. In Chapters 3-5 the authors map out the extent to which the monolayer reduces adhesion versus RH. They find that adhesion is

  10. Tribological issues of polysilicon surface-micromachining

    Energy Technology Data Exchange (ETDEWEB)

    Sniegowski, J.J.

    1997-12-01

    Polysilicon surface-micromachining is a Micro-Electro-Mechanical Systems (MEMS) manufacturing technology where the infrastructure for manufacturing silicon integrated circuits is used to fabricate micro-miniature mechanical devices. This presentation describes a multi-level mechanical polysilicon surface-micromachining technology and includes a discussion of the issues which affect device manufacture and performance. The multi-level technology was developed and is employed primarily to fabricate microactuated mechanisms. The intricate and complex motion offered by these devices is naturally accompanied by various forms of fraction and wear in addition to the classical stiction phenomena associated with micromechanical device fabrication and usage.

  11. Capacitive chemical sensor

    Science.gov (United States)

    Manginell, Ronald P; Moorman, Matthew W; Wheeler, David R

    2014-05-27

    A microfabricated capacitive chemical sensor can be used as an autonomous chemical sensor or as an analyte-sensitive chemical preconcentrator in a larger microanalytical system. The capacitive chemical sensor detects changes in sensing film dielectric properties, such as the dielectric constant, conductivity, or dimensionality. These changes result from the interaction of a target analyte with the sensing film. This capability provides a low-power, self-heating chemical sensor suitable for remote and unattended sensing applications. The capacitive chemical sensor also enables a smart, analyte-sensitive chemical preconcentrator. After sorption of the sample by the sensing film, the film can be rapidly heated to release the sample for further analysis. Therefore, the capacitive chemical sensor can optimize the sample collection time prior to release to enable the rapid and accurate analysis of analytes by a microanalytical system.

  12. The development of micromachined gyroscope structure and circuitry technology.

    Science.gov (United States)

    Xia, Dunzhu; Yu, Cheng; Kong, Lun

    2014-01-14

    This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs), piezoelectric vibrating gyroscopes (PVGs), surface acoustic wave (SAW) gyroscopes, bulk acoustic wave (BAW) gyroscopes, micromachined electrostatically suspended gyroscopes (MESGs), magnetically suspended gyroscopes (MSGs), micro fiber optic gyroscopes (MFOGs), micro fluid gyroscopes (MFGs), micro atom gyroscopes (MAGs), and special micromachined gyroscopes. Next, the control electronics of micromachined gyroscopes are analyzed. The control circuits are categorized into typical circuitry and special circuitry technologies. The typical circuitry technologies include typical analog circuitry and digital circuitry, while the special circuitry consists of sigma delta, mode matching, temperature/quadrature compensation and novel special technologies. Finally, the characteristics of various typical gyroscopes and their development tendency are discussed and investigated in detail.

  13. The Development of Micromachined Gyroscope Structure and Circuitry Technology

    Directory of Open Access Journals (Sweden)

    Dunzhu Xia

    2014-01-01

    Full Text Available This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs, piezoelectric vibrating gyroscopes (PVGs, surface acoustic wave (SAW gyroscopes, bulk acoustic wave (BAW gyroscopes, micromachined electrostatically suspended gyroscopes (MESGs, magnetically suspended gyroscopes (MSGs, micro fiber optic gyroscopes (MFOGs, micro fluid gyroscopes (MFGs, micro atom gyroscopes (MAGs, and special micromachined gyroscopes. Next, the control electronics of micromachined gyroscopes are analyzed. The control circuits are categorized into typical circuitry and special circuitry technologies. The typical circuitry technologies include typical analog circuitry and digital circuitry, while the special circuitry consists of sigma delta, mode matching, temperature/quadrature compensation and novel special technologies. Finally, the characteristics of various typical gyroscopes and their development tendency are discussed and investigated in detail.

  14. The Development of Micromachined Gyroscope Structure and Circuitry Technology

    Science.gov (United States)

    Xia, Dunzhu; Yu, Cheng; Kong, Lun

    2014-01-01

    This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs), piezoelectric vibrating gyroscopes (PVGs), surface acoustic wave (SAW) gyroscopes, bulk acoustic wave (BAW) gyroscopes, micromachined electrostatically suspended gyroscopes (MESGs), magnetically suspended gyroscopes (MSGs), micro fiber optic gyroscopes (MFOGs), micro fluid gyroscopes (MFGs), micro atom gyroscopes (MAGs), and special micromachined gyroscopes. Next, the control electronics of micromachined gyroscopes are analyzed. The control circuits are categorized into typical circuitry and special circuitry technologies. The typical circuitry technologies include typical analog circuitry and digital circuitry, while the special circuitry consists of sigma delta, mode matching, temperature/quadrature compensation and novel special technologies. Finally, the characteristics of various typical gyroscopes and their development tendency are discussed and investigated in detail. PMID:24424468

  15. Towards a sub 15-dBA optical micromachined microphone.

    Science.gov (United States)

    Kim, Donghwan; Hall, Neal A

    2014-05-01

    Micromachined microphones with grating-based optical-interferometric readout have been demonstrated previously. These microphones are similar in construction to bottom-inlet capacitive microelectromechanical-system (MEMS) microphones, with the exception that optoelectronic emitters and detectors are placed inside the microphone's front or back cavity. A potential advantage of optical microphones in designing for low noise level is the use of highly-perforated microphone backplates to enable low-damping and low thermal-mechanical noise levels. This work presents an experimental study of a microphone diaphragm and backplate designed for optical readout and low thermal-mechanical noise. The backplate is 1 mm × 1 mm and is fabricated in a 2-μm-thick epitaxial silicon layer of a silicon-on-insulator wafer and contains a diffraction grating with 4-μm pitch etched at the center. The presented system has a measured thermal-mechanical noise level equal to 22.6 dBA. Through measurement of the electrostatic frequency response and measured noise spectra, a device model for the microphone system is verified. The model is in-turn used to identify design paths towards MEMS microphones with sub 15-dBA noise floors.

  16. Ultrasonic physics

    CERN Document Server

    Richardson, E G

    1962-01-01

    Ultrasonic Physics, Second Edition, provides an introduction to the fundamental principles of ultrasonic physics. The book opens with a discussion of the sources of ultrasound. This is followed by separate chapters on the properties and detection of ultrasonic radiation; measurement of propagation constants, i.e., the velocity and absorption, of ultrasound; ultrasound propagation in gases, liquids, and solids; and ultrasound propagation in aerosols, suspensions, and emulsions. The final chapter covers miscellaneous physical and physico-chemical actions, including dispersion and coagulation of

  17. High Efficiency Micromachining System Applied in Nanolithography

    Science.gov (United States)

    Chen, Xing; Lee, Dong Weon; Choi, Young Soo

    Scanning probe lithography such as direct-writing lithographic processes and nanoscratching techniques based on scanning probe microscopy have presented new micromachining methods for microelectromechanical system (MEMS). In this paper, a micromachining system for thermal scanning probe lithography is introduced, which consists of the cantilever arrays and a big stroke micro XY-stage. A large machining area and high machining speed can be realized by combining arrays of cantilevers possessing sharp tips at their top with the novel micro XY-stage which can obtain big displacements under relatively low driving voltage and in a small size. According to the above configuration, this micromachining system is provided with high throughputs and suitable for industrialization due to its MEMS-based simple fabrication process. The novel micro XY-stage applied in this system is presented in detail including the unique structure and principles, which shows an obvious improvement and distinct advantages in comparison with traditional structures. It is analyzed by mathematical model and then simulated using finite element method (FEM), it is proved to be able to practically serve the micromachining system with high capability.

  18. Biomolecular sensing using surface micromachined silicon plates

    NARCIS (Netherlands)

    Zapata, A.M.; Carlen, E.T.; Kim, E.S.; Hsiao, J.; Traviglia, D.; Weinberg, M.S.; Delapierre, G.; Puers, R.

    2007-01-01

    Micromachined sensors to detect surface stress changes associated with interactions between an immobilized chemically selective receptor and a target analyte are presented. The top isolated sensing surface of a free-standing silicon plate is prepared with a thin Au layer, followed by a covalent atta

  19. Micromachined silicon plates for sensing molecular interactions

    NARCIS (Netherlands)

    Carlen, E.T.; Weinberg, M.S.; Dube, C.E.; Zapata, A.M.; Borenstein, J.T.

    2006-01-01

    A micromachined surface stress sensor based on a thin suspended crystalline silicon circular plate measures differential surface stress changes associated with vapor phase chemisorption of an alkanethiol self-assembled monolayer. The isolated face of the suspended silicon plate serves as the sensing

  20. Membrane capacitive deionization

    NARCIS (Netherlands)

    Biesheuvel, P.M.; Wal, van der A.

    2010-01-01

    Membrane capacitive deionization (MCDI) is an ion-removal process based on applying an electrical potential difference across an aqueous solution which flows in between oppositely placed porous electrodes, in front of which ion-exchange membranes are positioned. Due to the applied potential, ions ar

  1. Steerable Capacitive Proximity Sensor

    Science.gov (United States)

    Jenstrom, Del T.; Mcconnell, Robert L.

    1994-01-01

    Steerable capacitive proximity sensor of "capaciflector" type based partly on sensing units described in GSC-13377 and GSC-13475. Position of maximum sensitivity adjusted without moving sensor. Voltage of each driven shield adjusted separately to concentrate sensing electric field more toward one side or other.

  2. Model Design of Piezoelectric Micromachined Modal Gyroscope

    Directory of Open Access Journals (Sweden)

    Xiaojun Hu

    2011-01-01

    Full Text Available This paper reports a novel kind of solid-state microgyroscope, which is called piezoelectric micromachined modal gyroscope (PMMG. PMMG has large stiffness and robust resistance to shake and strike because there is no evident mass-spring component in its structure. This work focused on quantitative optimization of the gyroscope, which is still blank for such gyroscope. The modal analysis by the finite element method (FEM was firstly conducted. A set of quantitative indicators were developed to optimize the operation mode. By FEM, the harmonic analysis was conducted to find the way to efficiently actuate the operational mode needed. The optimal configuration of driving electrodes was obtained. At last, the Coriolis analysis was conducted to show the relation between angular velocity and differential output voltage by the Coriolis force under working condition. The results obtained in this paper provide theoretical basis for realizing this novel kind of micromachined gyroscope.

  3. Micromachined Inclinometer Based on Fluid Convection

    CERN Document Server

    Crespy, N; Combette, P; Boyer, P Temple; Giani, A; Foucaran, A

    2008-01-01

    This paper presents a numerical simulation and experimental results of a one-dimensional thermal inclinometer with the cavity filled of gas and liquid. The sensor principle consists of one heating resistor placed between two detectors. When the resistor is electrically powered, it creates a symmetrical temperature profile inside a micromachined silicon cavity. By applying a tilt to the sensor, the profile shifts in the same direction of the sensible axis corresponding to the horizontal one to one. The temperature profile and the sensitivity according to the CO2 gas and mineral oil SAE50 have been studied using numerical resolution of fluid dynamics equations with the computational fluid dynamics (CFD) software package Fluent V6.2. We have shown that the sensitivity of liquid sensors is higher than the gas sensors one. By using micromachined silicon technique, a thermal inclinometer with one pair of detectors placed at 300 um from the heater has been made. Experimental measurements corroborate with the numeric...

  4. Design of an electrochemical micromachining machine

    OpenAIRE

    Spieser, A; Ivanov, A.

    2014-01-01

    Electrochemical micromachining (μECM) is a non-conventional machining process based on the phenomenon of electrolysis. μECM became an attractive area of research due to the fact that this process does not create any defective layer after machining and that there is a growing demand for better surface integrity on different micro applications including microfluidics systems, stress-free drilled holes in automotive and aerospace manufacturing with complex shapes, etc. This work presents the des...

  5. Micromachined Parts Advance Medicine, Astrophysics, and More

    Science.gov (United States)

    2015-01-01

    In the mid-1990s, Marshall Space Flight Center awarded two SBIR contracts to Potomac Photonics, now based in Baltimore, for the development of computerized workstations capable of mass-producing tiny, intricate, diffractive optical elements. While the company has since discontinued the workstations, those contracts set the stage for Potomac Photonics to be a leader in the micromachining industry, where NASA remains one of its clients.

  6. Micromachined Piezoelectric Actuators for Cryogenic Adaptive Optics Project

    Data.gov (United States)

    National Aeronautics and Space Administration — TRS Technologies proposes micromachined single crystal piezoelectric actuator arrays to enable ultra-large stroke, high precision shape control for large aperture,...

  7. Design of Surface micromachined Compliant MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Joe Anthony Bradley

    2002-08-01

    The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a micro-compliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMS, most have used comb-drive actuation methods and bulk micromachining processes. This research focuses on fully-compliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms.

  8. Review of micromachining of ceramics by etching

    Institute of Scientific and Technical Information of China (English)

    H.T.TING; K.A.ABOU-EL-HOSSEIN; H.B.CHUA

    2009-01-01

    In the last two decades, there has been an enormous surge in interest in ceramic materials and, as a result, there have been significant advances in their development and applications. Their inherent properties, such as capability of operating at temperatures far above metals, high level of hardness and toughness, low coefficient of thermal expansion and high thermal conductivity rendered ceramics to be one of the leading engineering materials. Many research works have been conducted in the past few years on machining of advanced ceramics using different processing methods in order to obtain a better surface roughness, higher material removal rate and improved tool life. Micromachining using chemical etching is one of those methods that do not involve the problem of tool life and direct tool-work piece contact. However, only a few research works have been done on micromachining of ceramics using chemical etching. Hence, study of chemical machining of advanced ceramics is still needed as the process has found wide application in the industry because of its relative low operating costs. In this work, we summarize the recent progresses in machining of different types of advanced ceramics, material processing methods such as wet etching and dry etching, and finally the prospects for control of material removal rate and surface quality in the process of ceramic micromachining.

  9. Design of Surface Micromachined Compliant MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Bradley, Joe Anthony [Iowa State Univ., Ames, IA (United States)

    2002-12-31

    The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a micro-compliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMs, most have used comb-drive actuation methods and bulk micromachining processes. This research focused on fully-compliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms.

  10. Design of Surface micromachined Compliant MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Bradley, Joe Anthony [Iowa State Univ., Ames, IA (United States)

    2001-01-01

    The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a micro-compliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMS, most have used comb-drive actuation methods and bulk micromachining processes. This research focuses on fully-compliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms.

  11. Ultrasonic Motors

    Science.gov (United States)

    2003-06-01

    and T. Higuchi, "Cylindrical Micro Ultrasonic Motor Utilizing Bulk Lead Zirconate Titanate (PZT)," Japanese Journal of Applied Physics Part 1-Regular Papers Short Notes & Review Papers, vol. 38, pp. 3347-3350, 1999.

  12. Calculating and optimizing inter-electrode capacitances of charge division microchannel plate detectors

    Energy Technology Data Exchange (ETDEWEB)

    Xing, Yan [Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033 (China); University of Chinese Academy of Sciences, Beijing 100049 (China); Chen, Bo, E-mail: chenb@ciomp.ac.cn [Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033 (China); Zhang, Hong-Ji; Wang, Hai-Feng; He, Ling-Ping [Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033 (China); Jin, Fang-Yuan [Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033 (China); University of Chinese Academy of Sciences, Beijing 100049 (China)

    2016-04-01

    Based on the principle of charge division microchannel plate detectors, the inter-electrode capacitances of charge division anodes which are related to electronic noise of the charge sensitive amplifier and crosstalk effect of the anode are presented. Under all the requirements of charge division microchannel plate detectors such as the imaging linearity and spatial resolution, decreasing the inter-electrode capacitances is one way to improve the imaging performance. In this paper, we illustrate the simulation process of calculating the inter-electrode capacitances. Moreover, a Wedge and Strip (WSZ) anode is fabricated with the picosecond laser micromachining process. Comparing the simulated capacitances and measured capacitances, the three-dimensional finite element method is proved to be valid. Furthermore, by adjusting the design parameters of the anode, the effects of the substrate permittivity, insulation width and the size of pitch on the inter-electrode capacitances have been analysed. The structure of the charge division anode has been optimized based on the simulation data.

  13. Induced Charge Capacitive Deionization

    CERN Document Server

    Rubin, S; Biesheuvel, P M; Bercovici, M

    2016-01-01

    We demonstrate the phenomenon of induced-charge capacitive deionization (ICCDI) that occurs around a porous and conducting particle immersed in an electrolyte, under the action of an external electrostatic field. The external electric field induces an electric dipole in the porous particle, leading to capacitive charging of its volume by both cations and anions at opposite poles. This regime is characterized both by a large RC charging time and a small electrochemical charge relaxation time, which leads to rapid and significant deionization of ionic species from a volume which is on the scale of the particle. We show by theory and experiment that the transient response around a cylindrical particle results in spatially non-uniform charging and non-steady growth of depletion regions which emerge around the particle's poles. Potentially, ICCDI can be useful in applications where fast concentration changes of ionic species are required over large volumes.

  14. Capacitive deionization of seawater

    Energy Technology Data Exchange (ETDEWEB)

    Farmer, J.C.; Fix, D.V.; Mack, G.V. [and others

    1995-10-01

    Capacitive deionization with carbon aerogel electrodes is an efficient and economical new process for removing salt and impurities from water. Carbon aerogel is a material that enables the successful purification of water because of its high surface area, optimum pore size, and low electrical resistivity. The electrodes are maintained at a potential difference of about one volt; ions are removed from the water by the imposed electrostatic field and retained on the electrode surface until the polarity is reversed. The capacitive deionization of water with a stack of carbon aerogel electrodes has been successfully demonstrated. The overall process offers advantages when compared to conventional water-purification methods, requiring neither pumps, membranes, distillation columns, nor thermal heaters. Consequently, the overall process is both robust and energy efficient. The current state of technology development, commercialization, and potential applications of this process are reviewed.

  15. Lamb Wave Multitouch Ultrasonic Touchscreen.

    Science.gov (United States)

    Firouzi, Kamyar; Nikoozadeh, Amin; Carver, Thomas E; Khuri-Yakub, Butrus Pierre T

    2016-12-01

    Touchscreen sensors are widely used in many devices such as smart phones, tablets, and laptops with diverse applications. We present the design, analysis, and implementation of an ultrasonic touchscreen system that utilizes the interaction of transient Lamb waves with objects in contact with the screen. It attempts to improve on the existing ultrasound technologies, with the potential of addressing some of the weaknesses of the dominant technologies, such as the capacitive or resistive ones. Compared with the existing ultrasonic and acoustic modalities, among other advantages, it provides the capability of detecting several simultaneous touch points and also a more robust performance. The localization algorithm, given the hardware design, can detect several touch points with a very limited number of measurements (one or two). This in turn can significantly reduce the manufacturing cost.

  16. SYSTEM-LEVEL SIMULATION OF VIBRATORY MICROMACHINED GYROSCOPE WITH FENCE STRUCTURE

    Institute of Scientific and Technical Information of China (English)

    Che Lufeng; Xiong Bin; Wang Yuelin

    2004-01-01

    An equivalent circuit model of a novel fence structure vibratory micromachined gyroscope's oscillating properties is modeled by electrical equivalent circuits according to its dynamics equation. Equivalent circuit model of oscillating and differential detection capacitance model are implemented in the circuit simulation tool PSPICE, which is available in oscillating properties analysis such as oscillating's transient response, steady response and frequency response to angular rate to optimize working mode of the gyroscope. The model also enables sensor simulation with the interfacing electronics to analyse the performances of the whole system. Behavioral simulation of the system is performed to prove the function of detection circuits. The simulation results and measurement results show that the design of circuits is feasible.

  17. Design and simulation of a tuning fork micromachined gyroscope with slide film damping

    Institute of Scientific and Technical Information of China (English)

    CHE Lu-feng; XIONG Bin; JIAO Ji-wei; WANG Yue-lin

    2005-01-01

    A novel tuning fork micromachined gyroscope, based on slide-film damping, is presented. The electrostatic driving gyroscope consists of two driving masses each of which supports one sensitive mass. The angular rate is sensed by the differential capacitances consisted of movable bar electrodes and fixed bar electrodes located on the glass wafer. The gyroscope can operate at atmospheric pressure with slide film damping in the driving and sensing directions, eliminate vacuum packaging and restrain cross-axis acceleration signal. The results of design and simulation show that the driving and sensing mode frequencies are 3 106 Hz and 3 175 Hz,respectively, and the Q-values in driving and sensitive modes are 1 721 and 1 450 respectively. The design resolution is 0.025°/s.

  18. Scale Factor Determination of Micro-Machined Angular Rate Sensors Without a Turntable

    Institute of Scientific and Technical Information of China (English)

    Gaisser Alexander; GAO Zhongyu; ZHOU Bin; ZHANG Rong; CHEN Zhiyong

    2006-01-01

    This paper presents a digital readout system to detect small capacitive signals of a micro-machined angular rate sensor. The flexible parameter adjustment ability and the computation speed of the digital signal processor were used to develop a new calibration procedure to determine the scale factor of a gyroscope without a turntable. The force of gravity was used to deflect the movable masses in the sensor, which resulted in a corresponding angular rate input. The gyroscope scale factor was then measured without a turntable. Test results show a maximum deviation of about 1.2% with respect to the scale factor determined on a turntable with the accuracy independent of the manufacturing process and property variations. The calibration method in combination with the improved readout electronics can minimize the calibration procedure and, thus, reduce the manufacturing costs.

  19. Size Reduction of Tunable Micromachined Filters for High Speed Operations

    Institute of Scientific and Technical Information of China (English)

    Tomoyuki; Hino; Takeru; Amano; Wiganes; Janto; Fumio; Koyama

    2003-01-01

    The size reduction of tunable micromachined filters is carried out for high-speed wavelength tuning. We fabricated micromachined filters having a miniature structure with an air gap of 300 run and a short cantilever of 45 urn, exhibiting fast response of below 3 us.

  20. Size Reduction of Tunable Micromachined Filters for High Speed Operations

    Institute of Scientific and Technical Information of China (English)

    Tomoyuki Hino; Takeru Amano; Wiganes Janto; Fumio Koyama

    2003-01-01

    The size reduction of tunable micromachined filters is carried out for high-speed wavelength tuning. We fabricated micromachined filters having a miniature structure with an air gap of 300 nm and a short cantilever of 45 μm, exhibiting fast response of below 3 μs.

  1. Advanced technology trend survey of micromachines in Europe; Oshu ni okeru micromachine sentan gijutsu doko chosa

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1996-02-01

    In this research survey, the development trend of micromachine technology in Europe was surveyed, development level of micromachine technology of European companies was grasped, and practical application fields of their target were investigated. Technology development level of private companies in Japan`s national projects and practical application fields of Japan`s target were arranged. Trends of micromachine technology development are compared between Japanese companies and European companies. Among micromachine technology development projects in Europe, ``8520 MUST`` is a part of the ESPRIT Project. About 40,000 companies among about 170,000 companies in whole Europe are relating to the MUST Project. The main fields include the manufacturing technology, process control of machines, technology of safety, sensor technology in environmental fields, and automotive technology. The marketing fields of application include the automobile, military technology, home automation, industrial process, medical technology, environmental technology, and games. The results can be compared with the direction of research and development in Japan. 22 figs., 8 tabs.

  2. A Flexible Ultrasound Transducer Array with Micro-Machined Bulk PZT

    Directory of Open Access Journals (Sweden)

    Zhe Wang

    2015-01-01

    Full Text Available This paper proposes a novel flexible piezoelectric micro-machined ultrasound transducer, which is based on PZT and a polyimide substrate. The transducer is made on the polyimide substrate and packaged with medical polydimethylsiloxane. Instead of etching the PZT ceramic, this paper proposes a method of putting diced PZT blocks into holes on the polyimide which are pre-etched. The device works in d31 mode and the electromechanical coupling factor is 22.25%. Its flexibility, good conformal contacting with skin surfaces and proper resonant frequency make the device suitable for heart imaging. The flexible packaging ultrasound transducer also has a good waterproof performance after hundreds of ultrasonic electric tests in water. It is a promising ultrasound transducer and will be an effective supplementary ultrasound imaging method in the practical applications.

  3. Capacitive Substrate Coupling of Row–Column-Addressed 2-D CMUT Arrays

    DEFF Research Database (Denmark)

    Engholm, Mathias; Bouzari, Hamed; Jensen, Jørgen Arendt;

    2016-01-01

    of the semiconductor substrate can be sustained for at least 10 minutes making it applicable for row–column-addressed CMUT arrays for ultrasonic imaging. Theoretically the reduced parasitic capacitance indicates that the receive sensitivity of the bottom elements can be increased by a factor of 2:1....

  4. Micromachined permanent magnets and their MEMS applications

    Science.gov (United States)

    Cho, Hyoung Jin

    2002-01-01

    In this research, new micromachined permanent magnets have been proposed, developed and characterized for MEMS applications. In realizing micromachined permanent magnets, a new electroplating technique using external magnetic field and a bumper filling technique using a photolithographically defined mold with resin bonded magnetic particles have been developed. The newly developed micromachining techniques allow thick film-type permanent magnet components to be integrated to magnetic MEMS devices with dimensional control and alignment. Permanent magnet arrays with the dimensions ranging from 30 mum to 200 mum have been developed with an energy density up to 2.7 kJ/m3 in precisely defined forms in the micro scale. For the applications of the permanent magnets developed in this work, three novel magnetic MEMS devices such as a bi-directional magnetic actuator, a magnetically driven optical scanner, and a magnetic cell separator have been successfully realized. After design and modeling, each device has been fabricated and fully characterized. The bi-directional actuator with the electroplated permanent magnet array has achieved bi-directional motion clearly and shown good agreement with the analytical and simulated models. The optical scanner has shown linear bi-directional response under static actuation and stable bi-directional scanning performance under dynamic actuation. As a potential BioMEMS application of the developed permanent magnet, the prototype magnetic cell separator using the electroplated permanent magnet strip array has been proposed and demonstrated for magnetic bead patterning. In conclusion, new thick film-type, electroplated CoNiMnP and epoxy resin bonded Sr-ferrite permanent magnets have been developed and characterized, and then, three new magnetic MEMS devices using the permanent magnets such as a bi-directional magnetic actuator, an optical scanner and a magnetic cell separator have been realized in this research. The new micromachined

  5. Active micromachines: Microfluidics powered by mesoscale turbulence

    CERN Document Server

    Thampi, Sumesh P; Shendruk, Tyler N; Golestanian, Ramin; Yeomans, Julia M

    2016-01-01

    Dense active matter, from bacterial suspensions and microtubule bundles driven by motor proteins to cellular monolayers and synthetic Janus particles, is characterised by mesoscale turbulence, the emergence of chaotic flow structures. By immersing an ordered array of symmetric rotors in an active fluid, we introduce a microfluidic system that exploits spontaneous symmetry breaking in mesoscale turbulence to generate work. The lattice of rotors self-organises into a spin-state where neighbouring discs continuously rotate in permanent alternating directions due to combined hydrodynamic and elastic effects. Our virtual prototype demonstrates a new research direction for the design of micromachines powered by the nematohydrodynamic properties of active turbulence.

  6. Ultrasonic neuromodulation

    Science.gov (United States)

    Naor, Omer; Krupa, Steve; Shoham, Shy

    2016-06-01

    Ultrasonic waves can be non-invasively steered and focused into mm-scale regions across the human body and brain, and their application in generating controlled artificial modulation of neuronal activity could therefore potentially have profound implications for neural science and engineering. Ultrasonic neuro-modulation phenomena were experimentally observed and studied for nearly a century, with recent discoveries on direct neural excitation and suppression sparking a new wave of investigations in models ranging from rodents to humans. In this paper we review the physics, engineering and scientific aspects of ultrasonic fields, their control in both space and time, and their effect on neuronal activity, including a survey of both the field’s foundational history and of recent findings. We describe key constraints encountered in this field, as well as key engineering systems developed to surmount them. In closing, the state of the art is discussed, with an emphasis on emerging research and clinical directions.

  7. Ultrasonic Polishing

    Science.gov (United States)

    Gilmore, Randy

    1993-01-01

    The ultrasonic polishing process makes use of the high-frequency (ultrasonic) vibrations of an abradable tool which automatically conforms to the work piece and an abrasive slurry to finish surfaces and edges on complex, highly detailed, close tolerance cavities in materials from beryllium copper to carbide. Applications range from critical deburring of guidance system components to removing EDM recast layers from aircraft engine components to polishing molds for forming carbide cutting tool inserts or injection molding plastics. A variety of materials including tool steels, carbides, and even ceramics can be successfully processed. Since the abradable tool automatically conforms to the work piece geometry, the ultrasonic finishing method described offers a number of important benefits in finishing components with complex geometries.

  8. Ultrasonic Inspection

    Science.gov (United States)

    1976-01-01

    Automation Industries Inc. has had more than $2 million in contracts to produce innovative equipment for the Apollo program. When Marshall Space Flight Center sought a fast nondestructive way to inspect butt welds in aluminum alloys for spacecraft, the company developed a reliable ultrasonic device using multiple transducers called "delta manipulators" which detect lack of weld penetration not readily seen in radiograph automation. Industry soon adapted the ultrasonic equipment to a unique rail inspection device that saves countless man hours. Device is contained in self propelled railroad cars produced and operated by the company to check old track welds for deterioration.

  9. Capacitance of circular patch resonator

    Energy Technology Data Exchange (ETDEWEB)

    Miano, G.; Verolino, L. [Dip. di Ingegneria Elettrica, Ist. Nazionale di Fisica Nucleare, Naples (Italy); Panariello, G. [Dip. di Ingegneria Elettronica, Naples (Italy); Vaccaro, V.G. [Ist. Nazionale di Fisica Nucleare, Naples (Italy). Dipt. di Scienze Fisiche

    1995-11-01

    In this paper the capacitance of the circular microstrip patch resonator is computed. It is shown that the electrostatic problem can be formulated as a system of dual integral equations, and the most interesting techniques of solutions of these systems are reviewed. Some useful approximated formulas for the capacitance are derived and plots of the capacitance are finally given in a wide range of dielectric constants.

  10. Optical network of silicon micromachined sensors

    Science.gov (United States)

    Wilson, Mark L.; Burns, David W.; Zook, J. David

    1996-03-01

    The Honeywell Technology Center, in collaboration with the University of Wisconsin and the Mobil Corporation, and under funding from this ARPA sponsored program, are developing a new type of `hybrid' micromachined silicon/fiber optic sensor that utilizes the best attributes of each technology. Fiber optics provide a noise free method to read out the sensor without electrical power required at the measurement point. Micromachined silicon sensor techniques provide a method to design many different types of sensors such as temperature, pressure, acceleration, or magnetic field strength and report the sensor data using FDM methods. Our polysilicon resonant microbeam structures have a built in Fabry-Perot interferometer that offers significant advantages over other configurations described in the literature. Because the interferometer is an integral part of the structure, the placement of the fiber becomes non- critical, and packaging issues become considerably simpler. The interferometer spacing are determined by the thin-film fabrication processes and therefore can be extremely well controlled. The main advantage, however, is the integral vacuum cavity that ensures high Q values. Testing results have demonstrated relaxed alignment tolerances in packaging these devices, with an excellent Signal to Noise Ratio. Networks of 16 or more sensors are currently being developed. STORM (Strain Transduction by Optomechanical Resonant Microbeams) sensors can also provide functionality and self calibration information which can be used to improve the overall system reliability. Details of the sensor and network design, as well as test results, are presented.

  11. A Polymer-Based Capacitive Sensing Array for Normal and Shear Force Measurement

    Directory of Open Access Journals (Sweden)

    Ming-Yuan Cheng

    2010-11-01

    Full Text Available In this work, we present the development of a polymer-based capacitive sensing array. The proposed device is capable of measuring normal and shear forces, and can be easily realized by using micromachining techniques and flexible printed circuit board (FPCB technologies. The sensing array consists of a polydimethlysiloxane (PDMS structure and a FPCB. Each shear sensing element comprises four capacitive sensing cells arranged in a 2 × 2 array, and each capacitive sensing cell has two sensing electrodes and a common floating electrode. The sensing electrodes as well as the metal interconnect for signal scanning are implemented on the FPCB, while the floating electrodes are patterned on the PDMS structure. This design can effectively reduce the complexity of the capacitive structures, and thus makes the device highly manufacturable. The characteristics of the devices with different dimensions were measured and discussed. A scanning circuit was also designed and implemented. The measured maximum sensitivity is 1.67%/mN. The minimum resolvable force is 26 mN measured by the scanning circuit. The capacitance distributions induced by normal and shear forces were also successfully captured by the sensing array.

  12. A novel capacitive micro-accelerometer with grid strip capacitances and sensing gap alterable capacitances

    Institute of Scientific and Technical Information of China (English)

    Dong Linxi; Chen Jindan; Yan Haixia; Huo Weihong; Li Yongjie; Sun Lingling

    2009-01-01

    The comb capacitances fabricated by deep reactive ion etching (RIE) process have high aspect ratio which is usually smaller than 30 : 1 for the complicated process factors, and the combs are usually not parallel due to the well-known micro-loading effect and other process factors, which restricts the increase of the seismic mass by increasing the thickness of comb to reduce the thermal mechanical noise and the decrease of the gap of the comb capacitances for increasing the sensitive capacitance to reduce the electrical noise. Aiming at the disadvantage of the deep RIE, a novel capacitive micro-accelerometer with grid strip capacitances and sensing gap alterable capacitances is developed. One part of sensing of inertial signal of the micro-accelerometer is by the grid strip capacitances whose overlapping area is variable and which do not have the non-parallel plate's effect caused by the deep RIE process. Another part is by the sensing gap alterable capacitances whose gap between combs can be reduced by the actuators. The designed initial gap of the alterable comb capacitances is relatively large to depress the effect of the maximum aspect ratio (30 : 1) of deep RIE process. The initial gap of the capacitance of the actuator is smaller than the one of the comb capacitances. The difference between the two gaps is the initial gap of the sensitive capacitor. The designed structure depresses greatly the requirement of deep RIE process. The effects of non-parallel combs on the accelerometer are also analyzed. The characteristics of the micro-accelerometer are discussed by field emission microscopy (FEM) tool ANSYS. The tested devices based on slide-film damping effect are fabricated, and the tested quality factor is 514, which shows that grid strip capacitance design can partly improve the resolution and also prove the feasibility of the designed silicon-glass anodically bonding process.

  13. The Cooling and Lubrication Performance of Graphene Platelets in Micro-Machining Environments

    Science.gov (United States)

    Chu, Bryan

    The research presented in this thesis is aimed at investigating the use of graphene platelets (GPL) to address the challenges of excessive tool wear, reduced part quality, and high specific power consumption encountered in micro-machining processes. There are two viable methods of introducing GPL into micro-machining environments, viz., the embedded delivery method, where the platelets are embedded into the part being machined, and the external delivery method, where graphene is carried into the cutting zone by jetting or atomizing a carrier fluid. The study involving the embedded delivery method is focused on the micro-machining performance of hierarchical graphene composites. The results of this study show that the presence of graphene in the epoxy matrix improves the machinability of the composite. In general, the tool wear, cutting forces, surface roughness, and extent of delamination are all seen to be lower for the hierarchical composite when compared to the conventional two-phase glass fiber composite. These improvements are attributed to the fact that graphene platelets improve the thermal conductivity of the matrix, provide lubrication at the tool-chip interface and also improve the interface strength between the glass fibers and the matrix. The benefits of graphene are seen to also carry over to the external delivery method. The platelets provide improved cooling and lubrication performance to both environmentally-benign cutting fluids as well as to semi-synthetic cutting fluids used in micro-machining. The cutting performance is seen to be a function of the geometry (i.e., lateral size and thickness) and extent of oxygen-functionalization of the platelet. Ultrasonically exfoliated platelets (with 2--3 graphene layers and lowest in-solution characteristic lateral length of 120 nm) appear to be the most favorable for micro-machining applications. Even at the lowest concentration of 0.1 wt%, they are capable of providing a 51% reduction in the cutting

  14. Optimal pricing of capacitated networks

    NARCIS (Netherlands)

    Grigoriev, Alexander; Loon, van Joyce; Sitters, René; Uetz, Marc

    2009-01-01

    We address the algorithmic complexity of a profit maximization problem in capacitated, undirected networks. We are asked to price a set of $m$ capacitated network links to serve a set of $n$ potential customers. Each customer is interested in purchasing a network connection that is specified by a si

  15. Efficiency of Capacitively Loaded Converters

    DEFF Research Database (Denmark)

    Andersen, Thomas; Huang, Lina; Andersen, Michael A. E.;

    2012-01-01

    This paper explores the characteristic of capacitance versus voltage for dielectric electro active polymer (DEAP) actuator, 2kV polypropylene film capacitor as well as 3kV X7R multi layer ceramic capacitor (MLCC) at the beginning. An energy efficiency for capacitively loaded converters...... is introduced as a definition of efficiency. The calculated and measured efficiency curves for charging DEAP actuator, polypropylene film capacitor and X7R MLCC are provided and compared. The attention has to be paid for the voltage dependent capacitive load, like X7R MLCC, when evaluating the charging...... polypropylene film capacitor can be the equivalent capacitive load. Because of the voltage dependent characteristic, X7R MLCC cannot be used to replace the DEAP actuator. However, this type of capacitor can be used to substitute the capacitive actuator with voltage dependent property at the development phase....

  16. Structure optimization and simulation analysis of the quartz micromachined gyroscope

    Science.gov (United States)

    Wu, Xuezhong; Wang, Haoxu; Xie, Liqiang; Dong, Peitao

    2014-03-01

    Structure optimization and simulation analysis of the quartz micromachined gyroscope are reported in this paper. The relationships between the structure parameters and the frequencies of work mode were analysed by finite element analysis. The structure parameters of the quartz micromachined gyroscope were optimized to reduce the difference between the frequencies of the drive mode and the sense mode. The simulation results were proved by testing the prototype gyroscope, which was fabricated by micro-electromechanical systems (MEMS) technology. Therefore, the frequencies of the drive mode and the sense mode can match each other by the structure optimization and simulation analysis of the quartz micromachined gyroscope, which is helpful in the design of the high sensitivity quartz micromachined gyroscope.

  17. Micromachined systems-on-a-chip: Technology and applications

    Energy Technology Data Exchange (ETDEWEB)

    Smith, J.H. [Sandia National Labs., Albuquerque, NM (United States). Intelligent Micromachine Dept.; Lemkin, M.A. [Univ. of California, Berkeley, CA (United States). Berkeley Sensor and Actuator Center

    1997-04-01

    Sacrificial polysilicon surface micromachining is emerging as a technology that enables the mass production of complex microelectromechanical systems by themselves or integrated with microelectronic systems. Early versions of these micromachined systems-on-a-chip have already found application in the commercial world as acceleration sensors for airbag deployment (for example, ADI`s ADXL50). Two technologies described here, enable systems with increasing degrees of complexity to be fabricated. The first is a three-level polysilicon micromachining process which includes a fourth polysilicon electrical interconnect level, while the other is a single-level (+ second electrical interconnect level) polysilicon surface micromachining process integrated with 1.25 micron CMOS. Samples of systems-on-a-chip built in these processes such as combination locks, pop-up mirrors, and multi-axis accelerometers are also given.

  18. Structure optimization and simulation analysis of the quartz micromachined gyroscope

    Directory of Open Access Journals (Sweden)

    Xuezhong Wu

    2014-02-01

    Full Text Available Structure optimization and simulation analysis of the quartz micromachined gyroscope are reported in this paper. The relationships between the structure parameters and the frequencies of work mode were analysed by finite element analysis. The structure parameters of the quartz micromachined gyroscope were optimized to reduce the difference between the frequencies of the drive mode and the sense mode. The simulation results were proved by testing the prototype gyroscope, which was fabricated by micro-electromechanical systems (MEMS technology. Therefore, the frequencies of the drive mode and the sense mode can match each other by the structure optimization and simulation analysis of the quartz micromachined gyroscope, which is helpful in the design of the high sensitivity quartz micromachined gyroscope.

  19. Surface Micromachined Arrays of Transition-Edge Detectors Project

    Data.gov (United States)

    National Aeronautics and Space Administration — An innovative surface micromachining technique is described for the fabrication of closely-packed arrays of transition edge sensor (TES) x-ray microcalorimeters....

  20. Non-traditional micromachining processes fundamentals and applications

    CERN Document Server

    Bhattacharyya, B; Davim, J

    2017-01-01

    This book presents a complete coverage of micromachining processes from their basic material removal phenomena to past and recent research carried by a number of researchers worldwide. Chapters on effective utilization of material resources, improved efficiency, reliability, durability, and cost effectiveness of the products are presented. This book provides the reader with new and recent developments in the field of micromachining and microfabrication of engineering materials.

  1. Surface micromachined microengine as the driver for micromechanical gears

    Energy Technology Data Exchange (ETDEWEB)

    Garcia, E.J.; Sniegowski, J.J.

    1995-05-01

    The transmission of mechanical power is often accomplished through the use of gearing. The recently developed surface micromachined microengine provides us with an actuator which is suitable for driving surface micromachined geared systems. In this paper we will present aspects of the microengine as they relate to the driving of geared mechanisms, issues relating to the design of micro gear mechanisms, and details of a design of a microengine-driven geared shutter mechanism.

  2. Silicon Micromachined Microlens Array for THz Antennas

    Science.gov (United States)

    Lee, Choonsup; Chattopadhyay, Goutam; Mehdi, IImran; Gill, John J.; Jung-Kubiak, Cecile D.; Llombart, Nuria

    2013-01-01

    5 5 silicon microlens array was developed using a silicon micromachining technique for a silicon-based THz antenna array. The feature of the silicon micromachining technique enables one to microfabricate an unlimited number of microlens arrays at one time with good uniformity on a silicon wafer. This technique will resolve one of the key issues in building a THz camera, which is to integrate antennas in a detector array. The conventional approach of building single-pixel receivers and stacking them to form a multi-pixel receiver is not suited at THz because a single-pixel receiver already has difficulty fitting into mass, volume, and power budgets, especially in space applications. In this proposed technique, one has controllability on both diameter and curvature of a silicon microlens. First of all, the diameter of microlens depends on how thick photoresist one could coat and pattern. So far, the diameter of a 6- mm photoresist microlens with 400 m in height has been successfully microfabricated. Based on current researchers experiences, a diameter larger than 1-cm photoresist microlens array would be feasible. In order to control the curvature of the microlens, the following process variables could be used: 1. Amount of photoresist: It determines the curvature of the photoresist microlens. Since the photoresist lens is transferred onto the silicon substrate, it will directly control the curvature of the silicon microlens. 2. Etching selectivity between photoresist and silicon: The photoresist microlens is formed by thermal reflow. In order to transfer the exact photoresist curvature onto silicon, there needs to be etching selectivity of 1:1 between silicon and photoresist. However, by varying the etching selectivity, one could control the curvature of the silicon microlens. The figure shows the microfabricated silicon microlens 5 x5 array. The diameter of the microlens located in the center is about 2.5 mm. The measured 3-D profile of the microlens surface has a

  3. Micromachined bulk PZT tissue contrast sensor for fine needle aspiration biopsy.

    Science.gov (United States)

    Li, Tao; Gianchandani, Roma Y; Gianchandani, Yogesh B

    2007-02-01

    This paper describes a micromachined piezoelectric sensor, integrated into a cavity at the tip of a biopsy needle, and preliminary experiments to determine if such a device can be used for real-time tissue differentiation, which is needed for needle positioning guidance during fine needle aspiration (FNA) biopsy. The sensor is fabricated from bulk lead zirconate titanate (PZT), using a customized process in which micro electro-discharge machining is used to form a steel tool that is subsequently used for batch-mode ultrasonic micromachining of bulk PZT ceramic. The resulting sensor is 50 microm thick and 200 microm in diameter. It is placed in the biopsy needle cavity, against a steel diaphragm which is 300 microm diameter and has an average thickness of 23 microm. Devices were tested in materials that mimic the ultrasound characteristics of human tissue, used in the training of physicians, and with porcine fat and muscle tissue. In both schemes, the magnitude and frequency of an electrical impedance resonance peak showed tissue-specific characteristics as the needle was inserted. For example, in the porcine tissue, the impedance peak frequency changed approximately 13 MHz from the initial 163 MHz, and the magnitude changed approximately 1600 Omega from the initial 2100 Omega, as the needle moved from fat to muscle. Samples including oils and saline solution were tested for calibration, and an empirical tissue contrast model shows an approximately proportional relationship between measured frequency shift and sample acoustic impedance. These results suggest that the device can complement existing methods for guidance during biopsies.

  4. Apparatus for precision micromachining with lasers

    Science.gov (United States)

    Chang, J.J.; Dragon, E.P.; Warner, B.E.

    1998-04-28

    A new material processing apparatus using a short-pulsed, high-repetition-rate visible laser for precision micromachining utilizes a near diffraction limited laser, a high-speed precision two-axis tilt-mirror for steering the laser beam, an optical system for either focusing or imaging the laser beam on the part, and a part holder that may consist of a cover plate and a back plate. The system is generally useful for precision drilling, cutting, milling and polishing of metals and ceramics, and has broad application in manufacturing precision components. Precision machining has been demonstrated through percussion drilling and trepanning using this system. With a 30 W copper vapor laser running at multi-kHz pulse repetition frequency, straight parallel holes with size varying from 500 microns to less than 25 microns and with aspect ratios up to 1:40 have been consistently drilled with good surface finish on a variety of metals. Micromilling and microdrilling on ceramics using a 250 W copper vapor laser have also been demonstrated with good results. Materialographic sections of machined parts show little (submicron scale) recast layer and heat affected zone. 1 fig.

  5. Laser micromachining of semiconductors for photonics applications

    Science.gov (United States)

    Nantel, Marc; Yashkir, Yuri; Lee, Seong K.; Mugford, Chas; Hockley, Bernard S.

    2001-10-01

    For decades, precisely machining silicon has been critical for the success of the semiconductor industry. This has traditionally been done through wet chemical etching, but in the pursuit of integrating photonics devices on a single chip, other techniques are worth exploring. This quest opens up interest in finding a non-wet, non-contact, arbitrary-shape milling technique for silicon. In this paper, we present our latest work in the laser micromachining of silicon. A kilohertz-repetition-rate diode-pumped Nd:YLF laser (in infrared, green or ultraviolet modes) is focused on the surface of silicon wafers in a chlorine atmosphere for an enhanced magnitude and control of the etching rate. In the chlorine atmosphere, much less debris is deposited on the surface around the cut, sub-damage threshold machining is achieved for a better control of the etching depth, and etching rates ranging from 20-300,000 micron-cube/s have been measured. In particular, the use of an infrared laser beam is singled out, along with the advantages that it holds. Results of simulations highlight the particular characteristics of the various wavelength chosen for the machining.

  6. Void-Free Direct Bonding of CMUT Arrays with Single Crystalline Plates and Pull- In Insulation

    DEFF Research Database (Denmark)

    Christiansen, Thomas Lehrmann; Hansen, Ole; Dahl Johnsen, Mathias;

    2013-01-01

    The implications on direct bonding quality, when using a double oxidation step to fabricate capacitive micromachined ultrasonic transducers (CMUTs), is analyzed. The protrusions along the CMUT cavity edges created during the second oxidation are investigated using simulations, AFM measurements...

  7. Electrostatic and Small-Signal Analysis of CMUTs With Circular and Square Anisotropic Plates

    DEFF Research Database (Denmark)

    la Cour, Mette Funding; Christiansen, Thomas Lehrmann; Jensen, Jørgen Arendt;

    2015-01-01

    Traditionally, Capacitive Micromachined Ultrasonic Transducers (CMUTs) are modeled using the isotropic plate equation and this leads to deviations between analytical calcu- lations and Finite Element Modeling (FEM). In this paper, the deflection is calculated for both circular and square plates...

  8. Dual axis operation of a micromachined rate gyroscope

    Energy Technology Data Exchange (ETDEWEB)

    Juneau, T. [BSAC, Berkeley, CA (United States); Pisano, A.P. [Univ. California, Berkeley, CA (United States). Dept. of Mechanical Engineering; Smith, J. [Sandia National Lab., Albuquerque, NM (United States)

    1997-04-01

    Since micromachining technology has raised the prospect of fabricating high performance sensors without the associated high cost and large size, many researchers have investigated micromachined rate gyroscopes. The vast majority of research has focused on single input axis rate gyroscopes, but this paper presents work on a dual input axis micromachined rate gyroscope. The key to successful simultaneous dual axis operation is the quad symmetry of the circular oscillating rotor design. Untuned gyroscopes with mismatched modes yielded random walk as low as 10{degrees}/{radical}hour with cross sensitivity ranging from 6% to 16%. Mode frequency matching via electrostatic tuning allowed performance better than 2{degrees}/{radical}hour, but at the expense of excessive cross sensitivity.

  9. High-performance micromachined gyroscope with a slanted suspension cantilever

    Energy Technology Data Exchange (ETDEWEB)

    Xiao Dingbang; Wu Xuezhong; Hou Zhanqiang; Chen Zhihua; Dong Peitao; Li Shengyi, E-mail: Dingbangxiao@yahoo.com.c [Microsystem Laboratory, National University of Defense Technology, Changsha 410073 (China)

    2009-04-15

    This paper presents a novel structure for improving the stability and the mechanical noise of micromachined gyroscopes. Only one slanted cantilever is used for suspension in this gyroscope, so the asymmetry spring and the thermal stress, which most micromachined gyroscopes suffer from, are reduced. In order to reduce the mechanical noise, the proof masses are designed to be much larger than in most micromachined gyroscopes. The gyroscope chip is sealed at 0.001 Pa vacuum. A gyroscope sample and its read-out circuit are fabricated. The scale factor of this gyroscope is measured as 57.6 mV/(deg/sec) with a nonlinearity better than 0.12% in a measurement range of +-100 deg/sec. The short-term bias stability in 20 min is 60 deg/h.

  10. High-performance micromachined gyroscope with a slanted suspension cantilever

    Institute of Scientific and Technical Information of China (English)

    Xiao Dingbang; Wu Xuezhong; Hou Zhanqiang; Chen Zhihua; Dong Peitao; Li Shengyi

    2009-01-01

    This paper presents a novel structure for improving the stability and the mechanical noise of micromachined gyroscopes.Only one slanted cantilever is used for suspension in this gyroscope,so the asymmetry spring and the thermal stress,which most micromachined gyroscopes suffer from,are reduced.In order to reduce the mechanical noise,the proof masses are designed to be much larger than in most micromachined gyroscopes.The gyroscope chip is sealed at 0.00 1 Pa vacuum.A gyroscope sample and its read-out circuit are fabricated.The scale factor of this gyroscope is measured as 57.6 mV/(deg/sec) with a nonlinearity better than 0.12%in a measurement range of ±100 deg/sec.The short-term bias stability in 20 min is 60 deg/h.

  11. Unified capacitance modelling of MOSFETs

    Science.gov (United States)

    Johannessen, O. G.; Fjeldly, T. A.; Ytterdal, T.

    1994-01-01

    A unified physics based capacitance model for MOSFETs suitable for implementation in circuit simulators is presented. This model is based on the charge conserving, so-called Meyer-like approach proposed by Turchetti et al., and utilizes a unified charge control model to assure a continuous description of the MOSFET capacitances both above and below threshold. The capacitances associated with the model are comparable to those of the well-known BSIM model in the above-threshold regime, but it is more precise in the description of near-threshold and subthreshold behaviour. Moreover, the discontinuities at the transitions between the various regimes of operation are removed. The present modelling scheme was implemented in our circuit simulator AIM-Spice, and simulations of the dynamic behaviour of various demanding benchmark circuits clearly reveal its superiority over simulations using the simple Meyer model.

  12. Bioenergetics of Mammalian Sperm Capacitation

    Directory of Open Access Journals (Sweden)

    Alessandra Ferramosca

    2014-01-01

    Full Text Available After ejaculation, the mammalian male gamete must undergo the capacitation process, which is a prerequisite for egg fertilization. The bioenergetics of sperm capacitation is poorly understood despite its fundamental role in sustaining the biochemical and molecular events occurring during gamete activation. Glycolysis and mitochondrial oxidative phosphorylation (OXPHOS are the two major metabolic pathways producing ATP which is the primary source of energy for spermatozoa. Since recent data suggest that spermatozoa have the ability to use different metabolic substrates, the main aim of this work is to present a broad overview of the current knowledge on the energy-producing metabolic pathways operating inside sperm mitochondria during capacitation in different mammalian species. Metabolism of glucose and of other energetic substrates, such as pyruvate, lactate, and citrate, is critically analyzed. Such knowledge, besides its obvious importance for basic science, could eventually translate into the development of novel strategies for treatment of male infertility, artificial reproduction, and sperm selection methods.

  13. Silicon bulk micromachined hybrid dimensional artifact.

    Energy Technology Data Exchange (ETDEWEB)

    Claudet, Andre A.; Tran, Hy D.; Bauer, Todd Marks; Shilling, Katherine Meghan; Oliver, Andrew David

    2010-03-01

    A mesoscale dimensional artifact based on silicon bulk micromachining fabrication has been developed and manufactured with the intention of evaluating the artifact both on a high precision coordinate measuring machine (CMM) and video-probe based measuring systems. This hybrid artifact has features that can be located by both a touch probe and a video probe system with a k=2 uncertainty of 0.4 {micro}m, more than twice as good as a glass reference artifact. We also present evidence that this uncertainty could be lowered to as little as 50 nm (k=2). While video-probe based systems are commonly used to inspect mesoscale mechanical components, a video-probe system's certified accuracy is generally much worse than its repeatability. To solve this problem, an artifact has been developed which can be calibrated using a commercially available high-accuracy tactile system and then be used to calibrate typical production vision-based measurement systems. This allows for error mapping to a higher degree of accuracy than is possible with a glass reference artifact. Details of the designed features and manufacturing process of the hybrid dimensional artifact are given and a comparison of the designed features to the measured features of the manufactured artifact is presented and discussed. Measurement results from vision and touch probe systems are compared and evaluated to determine the capability of the manufactured artifact to serve as a calibration tool for video-probe systems. An uncertainty analysis for calibration of the artifact using a CMM is presented.

  14. Deep ultraviolet laser micromachining of novel fibre optic devices

    Science.gov (United States)

    Li, J.; Dou, J.; Herman, P. R.; Fricke-Begemann, T.; Ihlemann, J.; Marowsky, G.

    2007-04-01

    A deep ultraviolet F2 laser, with output at 157-nm wavelength, has been adopted for micro-shaping the end facets of single and multi-mode silica optical fibres. The high energy 7.9-eV photons drive strong interactions in the wide-bandgap silica fibres to enable the fabrication of surface-relief microstructures with high spatial resolution and smooth surface morphology. Diffraction gratings, focusing lenses, and Mach-Zehnder interferometric structures have been micromachined onto the cleaved-fibre facets and optically characterized. F2-laser micromachining is shown to be a rapid and facile means for direct-writing of novel infibre photonic components.

  15. Numerical simulation of inclination vibration in magnetic induction micromachines

    Energy Technology Data Exchange (ETDEWEB)

    Chen, J-Y; Zhou, J-B; Zhang, W-M; Meng, G [State Key Laboratory of Mechanical System and Vibration, Shanghai Jiao Tong University, 800 Dongchuan Road, Shanghai 200240 (China)], E-mail: jerrycc@sjtu.edu.cn

    2008-02-15

    This paper studies the inclination vibration of an axial-flux magnetic induction micromachine which is supported by hydrostatic thrust bearings. A mechanical model for the rotor and the corresponding fluid-film bearing is combined with an electromagnetic force model to study the linear and nonlinear rotordynamics of the system. Results obtained for the stability show that magnetic induction micromachine would encounter severe instability problem at high speed operations. The model developed here could serve as a useful reference for design optimization and operation scheme.

  16. Numerical simulation of inclination vibration in magnetic induction micromachines

    Science.gov (United States)

    Chen, J.-Y.; Zhou, J.-B.; Zhang, W.-M.; Meng, G.

    2008-02-01

    This paper studies the inclination vibration of an axial-flux magnetic induction micromachine which is supported by hydrostatic thrust bearings. A mechanical model for the rotor and the corresponding fluid-film bearing is combined with an electromagnetic force model to study the linear and nonlinear rotordynamics of the system. Results obtained for the stability show that magnetic induction micromachine would encounter severe instability problem at high speed operations. The model developed here could serve as a useful reference for design optimization and operation scheme.

  17. Lamb Wave Multi-touch Ultrasonic Touchscreen.

    Science.gov (United States)

    Firouzi, Kamyar; Nikoozadeh, Amin; Carver, Thomas; Khuri-Yakub, Butrus

    2016-09-13

    Touchscreen sensors are widely used in many devices such as smart phones, tablets, laptops, etc., with diverse applications. We present the design, analysis, and implementation of an ultrasonic touchscreen system that utilizes interaction of transient Lamb waves with objects in contact with the screen. It attempts to improve on the existing ultrasound technologies, with the potential of addressing some of the weaknesses of the dominant technologies, such as the capacitive or resistive ones. Compared to the existing ultrasonic and acoustic modalities, among other advantages, it provides the capability of detecting several simultaneous touch points, and also a more robust performance. The localization algorithm, given the hardware design, can detect several touch points with a very limited number of measurements (one or two). This in turn can significantly reduce the manufacturing cost.

  18. Water desalination via capacitive deionization

    NARCIS (Netherlands)

    Suss, M.E.; Porada, S.; Sun, X.; Biesheuvel, P.M.; Yoon, J.; Presser, V.

    2015-01-01

    Capacitive deionization (CDI) is an emerging technology for the facile removal of charged ionic species from aqueous solutions, and is currently being widely explored for water desalination applications. The technology is based on ion electrosorption at the surface of a pair of electrically charg

  19. Voltage Dependence of Supercapacitor Capacitance

    Directory of Open Access Journals (Sweden)

    Szewczyk Arkadiusz

    2016-09-01

    Full Text Available Electronic Double-Layer Capacitors (EDLC, called Supercapacitors (SC, are electronic devices that are capable to store a relatively high amount of energy in a small volume comparing to other types of capacitors. They are composed of an activated carbon layer and electrolyte solution. The charge is stored on electrodes, forming the Helmholtz layer, and in electrolyte. The capacitance of supercapacitor is voltage- dependent. We propose an experimental method, based on monitoring of charging and discharging a supercapacitor, which enables to evaluate the charge in an SC structure as well as the Capacitance-Voltage (C-V dependence. The measurement setup, method and experimental results of charging/discharging commercially available supercapacitors in various voltage and current conditions are presented. The total charge stored in an SC structure is proportional to the square of voltage at SC electrodes while the charge on electrodes increases linearly with the voltage on SC electrodes. The Helmholtz capacitance increases linearly with the voltage bias while a sublinear increase of total capacitance was found. The voltage on SC increases after the discharge of electrodes due to diffusion of charges from the electrolyte to the electrodes. We have found that the recovery voltage value is linearly proportional to the initial bias voltage value.

  20. Materials Issues for Micromachines Development - ASCI Program Plan

    Energy Technology Data Exchange (ETDEWEB)

    FANG,HUEI ELIOT; BATTAILE,CORBETT C.; BENAVIDES,GILBERT L.; ENSZ,MARK T.; BUCHHEIT,THOMAS E.; LAVAN,DAVID A.; CHEN,ER-PING; CHRISTENSON,TODD R.; DE BOER,MAARTEN P.; MILLER,SAMUEL L.; DUGGER,MICHAEL T.; PRASAD,SOMURI V.; REEDY JR.,EARL DAVID; THOMPSON,AIDAN P.; WONG,CHUNGNIN C.; YANG,PIN

    2000-05-01

    This report summarizes materials issues associated with advanced micromachines development at Sandia. The intent of this report is to provide a perspective on the scope of the issues and suggest future technical directions, with a focus on computational materials science. Materials issues in surface micromachining (SMM), Lithographic-Galvanoformung-Abformung (LIGA: lithography, electrodeposition, and molding), and meso-machining technologies were identified. Each individual issue was assessed in four categories: degree of basic understanding; amount of existing experimental data capability of existing models; and, based on the perspective of component developers, the importance of the issue to be resolved. Three broad requirements for micromachines emerged from this process. They are: (1) tribological behavior, including stiction, friction, wear, and the use of surface treatments to control these, (2) mechanical behavior at microscale, including elasticity, plasticity, and the effect of microstructural features on mechanical strength, and (3) degradation of tribological and mechanical properties in normal (including aging), abnormal and hostile environments. Resolving all the identified critical issues requires a significant cooperative and complementary effort between computational and experimental programs. The breadth of this work is greater than any single program is likely to support. This report should serve as a guide to plan micromachines development at Sandia.

  1. Development of a focused ion beam micromachining system

    Energy Technology Data Exchange (ETDEWEB)

    Pellerin, J.G.; Griffis, D.; Russell, P.E.

    1988-12-01

    Focused ion beams are currently being investigated for many submicron fabrication and analytical purposes. An FIB micromachining system consisting of a UHV vacuum system, a liquid metal ion gun, and a control and data acquisition computer has been constructed. This system is being used to develop nanofabrication and nanomachining techniques involving focused ion beams and scanning tunneling microscopes.

  2. Crystallographic effects during micromachining — A finite-element model

    Science.gov (United States)

    Song, Shin-Hyung; Choi, Woo Chun

    2015-07-01

    Mechanical micromachining is a powerful and effective way for manufacturing small sized machine parts. Even though the micromachining process is similar to the traditional machining, the material behavior during the process is much different. In particular, many researchers report that the basic mechanics of the work material is affected by microstructures and their crystallographic orientations. For example, crystallographic orientations of the work material have significant influence on force response, chip formation and surface finish. In order to thoroughly understand the effect of crystallographic orientations on the micromachining process, finite-element model (FEM) simulating orthogonal cutting process of single crystallographic material was presented. For modeling the work material, rate sensitive single crystal plasticity of face-centered cubic (FCC) crystal was implemented. For the chip formation during the simulation, element deletion technique was used. The simulation model is developed using ABAQUS/explicit with user material subroutine via user material subroutine (VUMAT). Simulations showed that variation of the specific cutting energy at different crystallographic orientations of work material shows significant anisotropy. The developed FEM model can be a useful prediction tool of micromachining of crystalline materials.

  3. Dynamics of micromachined vibrating gimbal and wheel gyroscope

    Institute of Scientific and Technical Information of China (English)

    TijingCAI

    2000-01-01

    We deduce dynamic equations of micromachined vibrating gimbal and wheel gyroscope and give an approximate solution of enough accuracy. The comparison between the approximate solution and the solution used often in the literature is given. According to property of the approximate solution a decoupled two-axes gyroscope will be composed of two single-axes gyroscopes.

  4. Monitoring of yeast cell concentration using a micromachined impedance sensor

    NARCIS (Netherlands)

    Krommenhoek, E.E.; Gardeniers, J.G.E.; Bomer, J.G.; Berg, van den A.; Li, X.; Ottens, M.; Wielen, van der L.A.M.; Dedem, van G.W.K.; Leeuwen, M.; Gulik, van W.M.; Heijnen, J.J.

    2005-01-01

    The paper describes the design, modelling and experimental characterization of a micromachined impedance sensor for on-line monitoring of the viable yeast cell concentration (biomass) in a miniaturized cell assay. Measurements in a Saccharomyces cerevisiae cell culture show that the permittivity of

  5. A batch process micromachined thermoelectric energy harvester: Fabrication and characterization

    NARCIS (Netherlands)

    Su, J.; Leonov, V.; Goedbloed, M.; Andel, Y. van; Nooijer, M.C.de; Elfrink, R.; Wang, Z.; Vullers, R.J.M.

    2010-01-01

    Micromachined thermopiles are considered as a cost-effective solution for energy harvesters working at a small temperature difference and weak heat flows typical for, e.g., the human body. They can be used for powering autonomous wireless sensor nodes in a body area network. In this paper, a microma

  6. Sub-band-gap laser micromachining of lithium niobate

    DEFF Research Database (Denmark)

    Christensen, F. K.; Müllenborn, Matthias

    1995-01-01

    method is reported which enables us to do laser processing of lithium niobate using sub-band-gap photons. Using high scan speeds, moderate power densities, and sub-band-gap photon energies results in volume removal rates in excess of 106µm3/s. This enables fast micromachining of small piezoelectric...

  7. Selective Mode Excitation And Detection Of Micromachined Resonators

    NARCIS (Netherlands)

    Prak, Albert; Elwenspoek, Miko; Fluitman, Jan H.J

    1992-01-01

    Distributed mechanical systems such as micromachined resonant strain gages possess an infinite number of modes of vibration. Mostly, one is interested in only one or a few modes. A method is described with which only the desired modes are excited and detected. This is achieved by geometrically shapi

  8. Ultrasonic Determination Of Recrystallization

    Science.gov (United States)

    Generazio, Edward R.

    1988-01-01

    State of recrystallization identified. Measurement of ultrasonic attenuation shows promise as means of detecting recrystallization in metal. Technique applicable to real-time acoustic monitoring of thermomechanical treatments. Starting with work-hardened material, one ultrasonically determines effect of annealing, using correlation between ultrasonic attenuation and temperature.

  9. Ultrasonic colour Doppler imaging

    DEFF Research Database (Denmark)

    Evans, David H.; Jensen, Jørgen Arendt; Nielsen, Michael Bachmann

    2011-01-01

    Ultrasonic colour Doppler is an imaging technique that combines anatomical information derived using ultrasonic pulse-echo techniques with velocity information derived using ultrasonic Doppler techniques to generate colour-coded maps of tissue velocity superimposed on grey-scale images of tissue ...

  10. Quantum Capacitance in Topological Insulators

    Science.gov (United States)

    Xiu, Faxian; Meyer, Nicholas; Kou, Xufeng; He, Liang; Lang, Murong; Wang, Yong; Yu, Xinxin; Fedorov, Alexei V.; Zou, Jin; Wang, Kang L.

    2012-01-01

    Topological insulators show unique properties resulting from massless, Dirac-like surface states that are protected by time-reversal symmetry. Theory predicts that the surface states exhibit a quantum spin Hall effect with counter-propagating electrons carrying opposite spins in the absence of an external magnetic field. However, to date, the revelation of these states through conventional transport measurements remains a significant challenge owing to the predominance of bulk carriers. Here, we report on an experimental observation of Shubnikov-de Haas oscillations in quantum capacitance measurements, which originate from topological helical states. Unlike the traditional transport approach, the quantum capacitance measurements are remarkably alleviated from bulk interference at high excitation frequencies, thus enabling a distinction between the surface and bulk. We also demonstrate easy access to the surface states at relatively high temperatures up to 60 K. Our approach may eventually facilitate an exciting exploration of exotic topological properties at room temperature. PMID:22993694

  11. Broadband electrostatic acoustic transducer for ultrasonic measurements in liquids.

    Science.gov (United States)

    Cantrell, J H; Heyman, J S; Yost, W T; Torbett, M A; Breazeale, M A

    1979-01-01

    A broadband capacitive electrostatic acoustic transducer (ESAT) has been developed for use in a liquid environment at megahertz frequencies. The ESAT basically consists of a thin conductive membrane stretched over a metallic housing. The membrane functions as the ground plate of a parallel plate capacitor, the other plate being a dc biased electrode recessed approximately 10 mum from the electrically grounded membrane. An ultrasonic wave incident on the membrane varies the membrane-electrode gap spacing and generates an electrical signal proportional to the wave amplitude. The entire assembly is sealed for immersion in a liquid environment. Calibration of the ESAT with incident ultrasonic waves of constant displacement amplitude from 1 to 15 MHz reveals a decrease in signal response with increasing frequency independent of membrane tension. The use of the ESAT as a broadband ultrasonic transducer in liquids with a predictable frequency response is promising.

  12. Ultrasonic modification of carbon materials for electrochemical capacitors

    Science.gov (United States)

    Rachiy, Bogdan I.; Nykoliuk, Marian O.; Budzulyak, Ivan M.; Kachmar, Andrii I.

    2017-01-01

    The paper is devoted to study the ultrasonic impact on the biomass of natural raw materials, which were used for the creation a nanoporous carbon material (NCM), which was used as electrode material for electrochemical capacitors (EC). The dry shells of apricot seeds were a feedstock, which were modified by the chemical treatment in the phosphoric acid and part of them were impacted by ultrasonic waves for 25 minutes. The NCM, which were obtained by carbonization at 550 °C, were modified by chemical treatment in the nitric acid. Thus, the different of modification NCM was obtained to compare their capacitance characteristics for EC. From experimental data we can do a conclusion, that ultrasonic modification and chemical treatment in nitric acidare improvecapacitance characteristics of NCM for EC.

  13. Redox regulation of mammalian sperm capacitation

    Directory of Open Access Journals (Sweden)

    Cristian O′Flaherty

    2015-01-01

    Full Text Available Capacitation is a series of morphological and metabolic changes necessary for the spermatozoon to achieve fertilizing ability. One of the earlier happenings during mammalian sperm capacitation is the production of reactive oxygen species (ROS that will trigger and regulate a series of events including protein phosphorylation, in a time-dependent fashion. The identity of the sperm oxidase responsible for the production of ROS involved in capacitation is still elusive, and several candidates are discussed in this review. Interestingly, ROS-induced ROS formation has been described during human sperm capacitation. Redox signaling during capacitation is associated with changes in thiol groups of proteins located on the plasma membrane and subcellular compartments of the spermatozoon. Both, oxidation of thiols forming disulfide bridges and the increase on thiol content are necessary to regulate different sperm proteins associated with capacitation. Reducing equivalents such as NADH and NADPH are necessary to support capacitation in many species including humans. Lactate dehydrogenase, glucose-6-phospohate dehydrogenase, and isocitrate dehydrogenase are responsible in supplying NAD (P H for sperm capacitation. Peroxiredoxins (PRDXs are newly described enzymes with antioxidant properties that can protect mammalian spermatozoa; however, they are also candidates for assuring the regulation of redox signaling required for sperm capacitation. The dysregulation of PRDXs and of enzymes needed for their reactivation such as thioredoxin/thioredoxin reductase system and glutathione-S-transferases impairs sperm motility, capacitation, and promotes DNA damage in spermatozoa leading to male infertility.

  14. Micromachined sensor and actuator research at Sandia`s Microelectronics Development Laboratory

    Energy Technology Data Exchange (ETDEWEB)

    Smith, J.H.

    1996-11-01

    An overview of the surface micromachining program at the Microelectronics Development Laboratory of Sandia National Laboratories is presented. Development efforts are underway for a variety of surface micromachined sensors and actuators for both defense and commercial applications. A technology that embeds micromechanical devices below the surface of the wafer prior to microelectronics fabrication has been developed for integrating microelectronics with surface-micromachined micromechanical devices. The application of chemical-mechanical polishing to increase the manufacturability of micromechanical devices is also presented.

  15. Design of nanosecond pulse laser micromachining system based on PMAC

    Science.gov (United States)

    Liu, Mingyan; Fu, Xing; Xu, Linyan; Lin, Qian; Gu, Shuang

    2012-10-01

    Pulse laser micromachining technology, as a branch of laser processing technology, has been widely used in MEMS device processing, aviation, instruments fabrication, circuit board design etc.. In this paper, a novel nanosecond pulse laser micromachining system is presented, which consists of nanosecond pulse LASER, optical path mechanical structure, transmission system, motion control system. Nanosecond pulse UV laser, with 355 nm wavelength and 40ns pulse width, is chosen as the light source. Optical path mechanical structure is designed to get ideal result of laser focusing. Motion control system, combining PMAC card with the PC software, can control the 3-D motion platform and complete microstructure processing. By CCD monitoring system, researchers can get real-time detection on the effect of laser beam focusing and processing process.

  16. Femtosecond Laser Micromachining Photonic and Microfluidic Devices in Transparent Materials

    CERN Document Server

    Cerullo, Giulio; Ramponi, Roberta

    2012-01-01

    Femtosecond laser micromachining of transparent material is a powerful and versatile technology. In fact, it can be applied to several materials. It is a maskless technology that allows rapid device prototyping, has intrinsic three-dimensional capabilities and can produce both photonic and microfluidic devices. For these reasons it is ideally suited for the fabrication of complex microsystems with unprecedented functionalities. The book is mainly focused on micromachining of transparent materials which, due to the nonlinear absorption mechanism of ultrashort pulses, allows unique three-dimensional capabilities and can be exploited for the fabrication of complex microsystems with unprecedented functionalities.This book presents an overview of the state of the art of this rapidly emerging topic with contributions from leading experts in the field, ranging from principles of nonlinear material modification to fabrication techniques and applications to photonics and optofluidics.

  17. Deep ultraviolet laser micromachining of novel fibre optic devices

    Energy Technology Data Exchange (ETDEWEB)

    Li, J [The Edward S. Rogers Sr. Department of Electrical and Computer Engineering, University of Toronto, 10 King' s College Road, Ontario M5S 3G4 (Canada); Dou, J [The Edward S. Rogers Sr. Department of Electrical and Computer Engineering, University of Toronto, 10 King' s College Road, Ontario M5S 3G4 (Canada); Herman, P R [The Edward S. Rogers Sr. Department of Electrical and Computer Engineering, University of Toronto, 10 King' s College Road, Ontario M5S 3G4 (Canada); Fricke-Begemann, T [Laser-Laboratorium Goettingen e.V., D-37077 Goettingen (Germany); Ihlemann, J [Laser-Laboratorium Goettingen e.V., D-37077 Goettingen (Germany); Marowsky, G [Laser-Laboratorium Goettingen e.V., D-37077 Goettingen (Germany)

    2007-04-15

    A deep ultraviolet F{sub 2} laser, with output at 157-nm wavelength, has been adopted for micro-shaping the end facets of single and multi-mode silica optical fibres. The high energy 7.9-eV photons drive strong interactions in the wide-bandgap silica fibres to enable the fabrication of surface-relief microstructures with high spatial resolution and smooth surface morphology. Diffraction gratings, focusing lenses, and Mach-Zehnder interferometric structures have been micromachined onto the cleaved-fibre facets and optically characterized. F{sub 2}-laser micromachining is shown to be a rapid and facile means for direct-writing of novel infibre photonic components.

  18. Artificial intelligence: Collective behaviors of synthetic micromachines

    Science.gov (United States)

    Duan, Wentao

    Synthetic nano- and micromotors function through the conversion of chemical free energy or forms of energy into mechanical motion. Ever since the first reports, such motors have been the subject of growing interest. In addition to motility in response to gradients, these motors interact with each other, resulting in emergent collective behavior like schooling, exclusion, and predator-prey. However, most of these systems only exhibit a single type of collective behavior in response to a certain stimuli. The research projects in the disseratation aim at designing synthetic micromotors that can exhibit transition between various collective behaviors in response to different stimuli, as well as quantitative understanding on the pairwise interaction and propulsion mechanism of such motors. Chapter 1 offers an overview on development of synthetic micromachines. Interactions and collective behaviors of micromotors are also summarized and included. Chapter 2 presents a silver orthophosphate microparticle system that exhibits collective behaviors. Transition between two collective patterns, clustering and dispersion, can be triggered by shift in chemical equilibrium upon the addition or removal of ammonia, in response to UV light, or under two orthogonal stimuli (UV and acoustic field) and powering mechanisms. The transitions can be explained by the self-diffusiophoresis mechanism resulting from either ionic or neutral solute gradients. Potential applications of the reported system in logic gates, microscale pumping, and hierarchical assembly have been demonstrated. Chapter 3 introduces a self-powered oscillatory micromotor system in which active colloids form clusters whose size changes periodically. The system consists of an aqueous suspension of silver orthophosphate particles under UV radiation, in the presence of a mixture of glucose and hydrogen peroxide. The colloid particles first attract with each other to form clusters. After a lag time of around 5min, chemical

  19. Development of a surface micromachined spiral-channel viscous pump

    Science.gov (United States)

    Kilani, Mohammad Ibrahim

    This work introduces a new pump, called the spiral pump, which targets the surface micromachining technology. We demonstrate the possibility of realizing the spiral pump geometry in standard surface micromachining, lay out the theoretical foundation for its operation, and conduct an objective assessment for its practicality. The spiral pump is a shear-driven viscous pump, which works by rotating a disk with a spiral groove at a close proximity over a stationary plate. Fluid contained in the spiral groove between the stationary plate and the rotating disk, is subject to a net tangential viscous stress, which allows it to be transported against an imposed pressure difference. A number of spiral pumps were fabricated in 5 levels of polysilicon using Sandia's Ultraplanar Multilevel Surface Micromachining Technology, SUMMiT, and the fabricated micropump were tested in dry-run mode using electrostatic probing and optical microscopy. To achieve a more comprehensive understanding of the spiral micropump operation, an analytical model was developed for the flow field in the spiral channel of the pump using an approximation which replaces the spiral channel with an equivalent straight channel with appropriate dimensions and boundary conditions. An analytical solution for this model at the lubrication limit relates the flow rate, torque and power consumption of the spiral pump to the pressure difference and rotation rate. The model was validated using macroscale experiments conducted on a scaled up spiral pump model, which involved a quantitative characterization of the spiral pump performance. Those experiments validate the developed theory and help assess the practicality of the spiral pump concept. In addition to the spiral pump, two positive-displacement ring-gear pumps were designed and fabricated in this work. The feasibility of surface micromachined ring-gear pumps is briefly investigated in this work, and compare to that of the spiral micropump.

  20. Optical fiber accelerometer based on a silicon micromachined cantilever

    Science.gov (United States)

    Malki, Abdelrafik; Lecoy, Pierre; Marty, Jeanine; Renouf, Christine; Ferdinand, Pierre

    1995-12-01

    An intensity-modulated fiber-optic accelerometer based on backreflection effects has been manufactured and tested. It uses a multimode fiber placed at a spherical mirror center, and the beam intensity is modulated by a micromachined silicon cantilever. This device has applications as an accelerometer and vibrometer for rotating machines. It exhibits an amplitude linearity of +/-1.2% in the range of 0.1-22 m s-2, a frequency linearity of +/-1% in the

  1. A Silicon Micromachined Gyroscope Driven by the Rotating Carrier Self

    Institute of Scientific and Technical Information of China (English)

    Fuxue Zhang; Xu Mao; Yu Liu; Nan Zhang; Wei Zhang

    2006-01-01

    This paper reported a silicon micromachined gyroscope which is driven by the rotating carrier's angular velocity, the silicon was manufactured by anisotropy etching. The design, fabrication and packing of the sensing element were introduced in the paper. The imitation experimentation and performance test have certificated that the principle of the gyroscope is correct and the gyroscope can be used to sense yawing or pitching angular velocity of the rotating carrier, and the angular velocity of the rotating carrier itself.

  2. Bimetallic Thermal Resists for Photomask, Micromachining and Microfabrication

    OpenAIRE

    Tu, Richard Yuqiang

    2004-01-01

    Photoresists and photomasks are two of the most critical materials in microfabrication and micromachining industries. As the shift towards shorter wavelength exposure continues, conventional organic photoresists and chromelquartz photomasks start to encounter problems. This thesis investigates and presents an alternative to organic photoresists and chromium photomasks which overcomes their intrinsic problems. A bimetallic thin film, such as BilIn and SnIIn, creates an inorganic thermal resist...

  3. An overview of micromachined platforms for thermal sensing and gas detection

    Energy Technology Data Exchange (ETDEWEB)

    Manginell, R.P.; Smith, J.H.; Ricco, A.J.

    1997-03-01

    Micromachined hotplates, membranes, filaments, and cantilevers have all been used as platforms for thermal sensing and gas detection. Compared with conventional devices, micromachined sensors are characterized by low power consumption, high sensitivity, and fast response time. Much of these gains can be attributed to the size reductions achieved by micromachining. In addition, micromachining permits easy, yet precise tailoring of the heat transfer characteristics of these devices. By simple alterations in device geometry and materials used, the relative magnitudes of radiation, convection and conduction losses and Joule heat gains can be adjusted, and in this way device response can be optimized for specific applications. The free-standing design of micromachined platforms, for example, reduces heat conduction losses to the substrate, thereby making them attractive as low power, fast-response heaters suitable for a number of applications. However, while micromachining solves some of the heat transfer problems typical of conventionally produced devices, it introduces some of its own. These trade-offs will be discussed in the context of several micromachined thermal and gas sensors present in the literature. These include micromachined flow sensors, gas thermal conductivity sensors, pressure sensors, uncooled IR sensors, metal-oxide and catalytic/calorimetric gas sensors. Recent results obtained for a microbridge-based catalytic/calorimetric gas sensor will also be presented as a means of further illustrating the concepts of thermal design in micromachined sensors.

  4. 3-D Vector Flow Using a Row-Column Addressed CMUT Array

    DEFF Research Database (Denmark)

    Holbek, Simon; Christiansen, Thomas Lehrmann; Engholm, Mathias;

    2016-01-01

    This paper presents an in-house developed 2-D capacitive micromachined ultrasonic transducer (CMUT) appliedfor 3-D blood flow estimation. The probe breaks with conventional transducers in two ways; first, the ultrasonicpressure field is generated from thousands of small vibrating micromachined...

  5. Electromagnetic ultrasonic guided waves

    CERN Document Server

    Huang, Songling; Li, Weibin; Wang, Qing

    2016-01-01

    This book introduces the fundamental theory of electromagnetic ultrasonic guided waves, together with its applications. It includes the dispersion characteristics and matching theory of guided waves; the mechanism of production and theoretical model of electromagnetic ultrasonic guided waves; the effect mechanism between guided waves and defects; the simulation method for the entire process of electromagnetic ultrasonic guided wave propagation; electromagnetic ultrasonic thickness measurement; pipeline axial guided wave defect detection; and electromagnetic ultrasonic guided wave detection of gas pipeline cracks. This theory and findings on applications draw on the author’s intensive research over the past eight years. The book can be used for nondestructive testing technology and as an engineering reference work. The specific implementation of the electromagnetic ultrasonic guided wave system presented here will also be of value for other nondestructive test developers.

  6. Advances of focused ion beam in micromachining technology

    Science.gov (United States)

    Zhang, S. J.; Fang, F. Z.; Hu, X. T.

    2007-12-01

    The applications of focused ion beam (FIB) technology in micromachining has advantages over other micromachining technologies, such as high feature resolution, capable markless process, rapid prototyping and adaptive for various materials and geometries. FIB direct-writing techniques are explored for their excellent abilities in micromachining. In addition to FIB technology and its principles for imaging, milling and deposition, a typical FIB system is presented. The key to FIB direct-writing technology is to operate a FIB with a proper beam size, shape, current and energy to remove or add a required amount of material from a pre-defined location in a controlled manner. In this way, high-precision and complicated three-dimensional structures with controlled profiles can be fabricated. Several examples of using milling technique for making high-quality microdevices or high-precision microcomponents for optical and other applications are given. The demonstration of milling a narrow readout gap at an oblique angle on a microaccelerometer shows a FIB's application on a small but accurate post-processing step on a micromechanical device. The diffractive optical element (DOE) with continuous relief and submicron feature size fabricated by FIB milling is also presented to prove high resolution and accurate relief control. Furthermore, FIB milling is used to shape a variety of cutting tools with extremely precise dimensions and complex tool face shapes.

  7. Capacitance enhancement via electrode patterning

    Energy Technology Data Exchange (ETDEWEB)

    Ho, Tuan A.; Striolo, Alberto, E-mail: a.striolo@ucl.ac.uk [School of Chemical, Biological and Materials Engineering, The University of Oklahoma, Norman, Oklahoma 73019 (United States); Department of Chemical Engineering, University College London, Torrington Place, London WC1E 7JE (United Kingdom)

    2013-11-28

    The necessity of increasing the energy density in electric double layer capacitors to meet current demand is fueling fundamental and applied research alike. We report here molecular dynamics simulation results for aqueous electrolytes near model electrodes. Particular focus is on the effect of electrode patterning on the structure of interfacial electrolytes, and on the potential drop between the solid electrodes and the bulk electrolytes. The latter is estimated by numerically integrating the Poisson equation using the charge densities due to water and ions accumulated near the interface as input. We considered uniform and patterned electrodes, both positively and negatively charged. The uniformly charged electrodes are modeled as graphite. The patterned ones are obtained by removing carbon atoms from the top-most graphene layer, yielding nanoscopic squares and stripes patterns. For simplicity, the patterned electrodes are effectively simulated as insulators (the charge remains localized on the top-most layer of carbon atoms). Our simulations show that the patterns alter the structure of water and the accumulation of ions at the liquid-solid interfaces. Using aqueous NaCl solutions, we found that while the capacitance calculated for three positively charged electrodes did not change much, that calculated for the negatively charged electrodes significantly increased upon patterning. We find that both water structure and orientation, as well as ion accumulation affect the capacitance. As electrode patterning affects differently water structure and ion accumulation, it might be possible to observe ion-specific effects. These results could be useful for advancing our understanding of electric double layer capacitors, capacitive desalination processes, as well as of fundamental interfacial electrolytes properties.

  8. Dual Cryogenic Capacitive Density Sensor

    Science.gov (United States)

    Youngquist, Robert; Mata, Carlos; Vokrot, Peter; Cox, Robert

    2009-01-01

    A dual cryogenic capacitive density sensor has been developed. The device contains capacitive sensors that monitor two-phase cryogenic flow density to within 1% accuracy, which, if temperature were known, could be used to determine the ratio of liquid to gas in the line. Two of these density sensors, located a known distance apart, comprise the sensor, providing some information on the velocity of the flow. This sensor was constructed as a proposed mass flowmeter with high data acquisition rates. Without moving parts, this device is capable of detecting the density change within a two-phase cryogenic flow more than 100 times a second. Detection is enabled by a series of two sets of five parallel plates with stainless steel, cryogenically rated tubing. The parallel plates form the two capacitive sensors, which are measured by electrically isolated digital electronics. These capacitors monitor the dielectric of the flow essentially the density of the flow and can be used to determine (along with temperature) the ratio of cryogenic liquid to gas. Combining this information with the velocity of the flow can, with care, be used to approximate the total two-phase mass flow. The sensor can be operated at moderately high pressures and can be lowered into a cryogenic bath. The electronics have been substantially improved over the older sensors, incorporating a better microprocessor, elaborate ground loop protection and noise limiting circuitry, and reduced temperature sensitivity. At the time of this writing, this design has been bench tested at room temperature, but actual cryogenic tests are pending

  9. Capacitance enhancement via electrode patterning

    Science.gov (United States)

    Ho, Tuan A.; Striolo, Alberto

    2013-11-01

    The necessity of increasing the energy density in electric double layer capacitors to meet current demand is fueling fundamental and applied research alike. We report here molecular dynamics simulation results for aqueous electrolytes near model electrodes. Particular focus is on the effect of electrode patterning on the structure of interfacial electrolytes, and on the potential drop between the solid electrodes and the bulk electrolytes. The latter is estimated by numerically integrating the Poisson equation using the charge densities due to water and ions accumulated near the interface as input. We considered uniform and patterned electrodes, both positively and negatively charged. The uniformly charged electrodes are modeled as graphite. The patterned ones are obtained by removing carbon atoms from the top-most graphene layer, yielding nanoscopic squares and stripes patterns. For simplicity, the patterned electrodes are effectively simulated as insulators (the charge remains localized on the top-most layer of carbon atoms). Our simulations show that the patterns alter the structure of water and the accumulation of ions at the liquid-solid interfaces. Using aqueous NaCl solutions, we found that while the capacitance calculated for three positively charged electrodes did not change much, that calculated for the negatively charged electrodes significantly increased upon patterning. We find that both water structure and orientation, as well as ion accumulation affect the capacitance. As electrode patterning affects differently water structure and ion accumulation, it might be possible to observe ion-specific effects. These results could be useful for advancing our understanding of electric double layer capacitors, capacitive desalination processes, as well as of fundamental interfacial electrolytes properties.

  10. Compact monolithic capacitive discharge unit

    Science.gov (United States)

    Roesler, Alexander W.; Vernon, George E.; Hoke, Darren A.; De Marquis, Virginia K.; Harris, Steven M.

    2007-06-26

    A compact monolithic capacitive discharge unit (CDU) is disclosed in which a thyristor switch and a flyback charging circuit are both sandwiched about a ceramic energy storage capacitor. The result is a compact rugged assembly which provides a low-inductance current discharge path. The flyback charging circuit preferably includes a low-temperature co-fired ceramic transformer. The CDU can further include one or more ceramic substrates for enclosing the thyristor switch and for holding various passive components used in the flyback charging circuit. A load such as a detonator can also be attached directly to the CDU.

  11. Flexible PVDF ferroelectric capacitive temperature sensor

    KAUST Repository

    Khan, Naveed

    2015-08-02

    In this paper, a capacitive temperature sensor based on polyvinylidene fluoride (PVDF) capacitor is explored. The PVDF capacitor is characterized below its Curie temperature. The capacitance of the PVDF capacitor changes vs temperature with a sensitivity of 16pF/°C. The linearity measurement of the capacitance-temperature relation shows less than 0.7°C error from a best fit straight line. An LC oscillator based temperature sensor is demonstrated based on this capacitor.

  12. Laser Micromachining and Information Discovery Using a Dual Beam Interferometry

    Energy Technology Data Exchange (ETDEWEB)

    Senthil P. Theppakuttaikomaraswamy

    2001-12-31

    Lasers have proven to be among the most promising tools for micromachining because they can process features down to the size of the laser wavelength (smaller than 1 micrometer) and they provide a non-contact technology for machining. The demand for incorporating in-situ diagnostics technology into the micromachining environment is driven by the increasing need for producing micro-parts of high quality and accuracy. Laser interferometry can be used as an on-line monitoring tool and it is the aim of this work to enhance the understanding and application of Michelson interferometry principle for the in-situ diagnostics of the machining depth on the sub-micron and micron scales. micromachining is done on two different materials and a comprehensive investigation is done to control the width and depth of the machined feature. To control the width of the feature, laser micromachining is done on copper and a detailed analysis is performed. The objective of this experiment is to make a precision mask for sputtering with an array of holes on it using an Nd:YAG laser of 532 nm wavelength. The diameter of the hole is 50 {micro}m and the spacing between holes (the distance between the centers) is 100 {micro}m. Michelson interferometer is integrated with a laser machining system to control the depth of machining. An excimer laser of 308 nm wavelength is used for micromachining. A He-Ne laser of 632.8 nm wavelength is used as the light source for the interferometer. Interference patterns are created due to the change in the path length between the two interferometer arms. The machined depth information is obtained from the interference patterns on an oscilloscope detected by a photodiode. To compare the predicted depth by the interferometer with the true machining depth, a surface profilometer is used to measure the actual machining depth on the silicon. It is observed that the depths of machining obtained by the surface profile measurement are in accordance with the

  13. Laser Micromachining and Information Discovery Using a Dual Beam Interferometry

    Energy Technology Data Exchange (ETDEWEB)

    Theppakuttaikomaraswamy, Senthil P. [Iowa State Univ., Ames, IA (United States)

    2001-01-01

    Lasers have proven to be among the most promising tools for micromachining because they can process features down to the size of the laser wavelength (smaller than 1 micrometer) and they provide a non-contact technology for machining. The demand for incorporating in-situ diagnostics technology into the micromachining environment is driven by the increasing need for producing micro-parts of high quality and accuracy. Laser interferometry can be used as an on-line monitoring tool and it is the aim of this work to enhance the understanding and application of Michelson interferometry principle for the in-situ diagnostics of the machining depth on the sub-micron and micron scales. micromachining is done on two different materials and a comprehensive investigation is done to control the width and depth of the machined feature. To control the width of the feature, laser micromachining is done on copper and a detailed analysis is performed. The objective of this experiment is to make a precision mask for sputtering with an array of holes on it using an Nd:YAG laser of 532 nm wavelength. The diameter of the hole is 50 μm and the spacing between holes (the distance between the centers) is 100 μm. Michelson interferometer is integrated with a laser machining system to control the depth of machining. An excimer laser of 308 nm wavelength is used for micromachining. A He-Ne laser of 632.8 nm wavelength is used as the light source for the interferometer. Interference patterns are created due to the change in the path length between the two interferometer arms. The machined depth information is obtained from the interference patterns on an oscilloscope detected by a photodiode. To compare the predicted depth by the interferometer with the true machining depth, a surface profilometer is used to measure the actual machining depth on the silicon. It is observed that the depths of machining obtained by the surface profile measurement are in accordance with the interferometer

  14. Microgénérateurs à aimants permanents entraînés par des microturbines à air ou des micromachines à gaz chaud

    OpenAIRE

    Herrault, Florian

    2009-01-01

    L'énergie nécessaire au fonctionnement des systèmes électroniques est en train de surpasser les capacités des batteries actuelles. Par conséquent, l'application des technologies MEMS pour la conception de nouvelles sources de puissance à haute performance est très attractive. Cette thèse considère la fabrication de microgénérateurs entraînés par gaz froid ou chaud. Tout d'abord, nous avons développé des microgénérateurs à aimants permanents compatibles avec le fonctionnement de micromachin...

  15. Ultrasonic Hot Embossing

    Directory of Open Access Journals (Sweden)

    Werner Karl Schomburg

    2011-05-01

    Full Text Available Ultrasonic hot embossing is a new process for fast and low-cost production of micro systems from polymer. Investment costs are on the order of 20.000 € and cycle times are a few seconds. Microstructures are fabricated on polymer foils and can be combined to three-dimensional systems by ultrasonic welding.

  16. Ultrasonic corona sensor study

    Science.gov (United States)

    Harrold, R. T.

    1976-01-01

    The overall objective of this program is to determine the feasibility of using ultrasonic (above 20 kHz) corona detection techniques to detect low order (non-arcing) coronas in varying degrees of vacuum within large high vacuum test chambers, and to design, fabricate, and deliver a prototype ultrasonic corona sensor.

  17. Characterization of a bulk-micromachined membraneless in-plane thermopile

    NARCIS (Netherlands)

    Wang, Z.; Andel, Y. van; Jambunathan, M.; Leonov, V.; Elfrink, R.; Vullers, R.J.M.

    2011-01-01

    This paper describes the characterization method and results for bulk- micromachined in-plane thermopiles. Made of poly-Si or poly-SiGe, the thermocouple legs bridge the hot and cold side of a Si frame, which is formed by bulk micromachining. The characterization of the fabricated devices is carried

  18. Effect of Additive Agent on the Electrochemical Capacitance of Activated Carbon

    Institute of Scientific and Technical Information of China (English)

    Wang Gui-Xin; Qu Mei-Zhen; Chen Li; Wang Guo-Ping; Zhang Qing-Tang; Yu Zuo-Long

    2004-01-01

    In order to compare the effect of additive agent on the electrochemical capacitance of activated carbon, three additive agents like carbon nanotubes (CNTs), activated carbon fibre (ACF)and acetylene black (AB) were added to activated carbon by ultrasonic dispersion. Two electrodes including 95wt.% activated carbon, 2wt.% additive agent and 3wt.% PTFE binder were prepared.Ecs were assembled in an argon-filled glove box by sandwiching a microporous separator (Celgard 2400) between two electrodes. 1.0 M LiClO4/ethylene carbonate (EC)-diethyl carbonate (DEC) (1:1in vol.) was used as the electrolyte. The performance of the Ecs was tested with constant current charge-discharge model between 0.0 and 3.0V at 298K using a battery-testing instrument under the same conditions.From the Fig. 1, we can know that the specific capacitance decreases with the current density increasing. As far as the three carbon materials, CNTs show better performance than others. At low current density, the specific capacitance of CNTs is adjacent to that of ACF, while higher than that of AB; At high current density, the specific capacitance of CNTs is higher than that of both ACF and AB. What's more, capacity fading of CNTs is smaller than those of both ACF and AB. At 10 mA/cm2 current density, the specific capacitance of CNTs is 1.33 times of that ACF and 1.58 times of that AB, respectively. From the CVs (Fig. 2), the capacitance of three materials is contributed mainly by double-layer, nonfaradically. The performance difference is ascribed to the structure and electrolyte reservoir: CNTs used have a wide diameter range between 20 and 100nm and hollow tube structure, ACF has a narrow diameter range and many micropores, AB are dots and cannot form good conductive net. All the above reasons lead the different electrochemical properties of three additive agents.

  19. Energy-Efficient Capacitive-Sensor Interfaces

    NARCIS (Netherlands)

    Tan, Z.

    2013-01-01

    This thesis describes the theory, design and realization of energy-efficient capacitive-sensor interfaces that are dedicated to energy-constrained applications. The goal of this work is to explore energy-efficient capacitive-sensor interface design techniques both at the system and the circuit level

  20. The pyramidal capacitated vehicle routing problem

    DEFF Research Database (Denmark)

    Lysgaard, Jens

    2010-01-01

    This paper introduces the pyramidal capacitated vehicle routing problem (PCVRP) as a restricted version of the capacitated vehicle routing problem (CVRP). In the PCVRP each route is required to be pyramidal in a sense generalized from the pyramidal traveling salesman problem (PTSP). A pyramidal...

  1. Locating Depots for Capacitated Vehicle Routing

    DEFF Research Database (Denmark)

    Gørtz, Inge Li; Nagarajan, Viswanath

    2016-01-01

    We study a location-routing problem in the context of capacitated vehicle routing. The input to the k-location capacitated vehicle routing problem (k-LocVRP) consists of a set of demand locations in a metric space and a fleet of k identical vehicles, each of capacity Q. The objective is to locate k...

  2. Novel RF-MEMS capacitive switching structures

    NARCIS (Netherlands)

    Rottenberg, X.; Jansen, H.; Fiorini, P.; De Raedt, W.; Tilmans, H.A.C.

    2002-01-01

    This paper reports on novel RF-MEMS capacitive switching devices implementing an electrically floating metal layer covering the dielectric to ensure intimate contact with the bridge in the down state. This results in an optimal switch down capacitance and allows optimisation of the down/up capacitan

  3. Capacitively-coupled chopper amplifiers

    CERN Document Server

    Fan, Qinwen; Huijsing, Johan H

    2017-01-01

    This book describes the concept and design of the capacitively-coupled chopper technique, which can be used in precision analog amplifiers. Readers will learn to design power-efficient amplifiers employing this technique, which can be powered by regular low supply voltage such as 2V and possibly having a +\\-100V input common-mode voltage input. The authors provide both basic design concepts and detailed design examples, which cover the area of both operational and instrumentation amplifiers for multiple applications, particularly in power management and biomedical circuit designs. Discusses basic working principles and details of implementation for proven designs; Includes a diverse set of applications, along with measurement results to demonstrate the effectiveness of the technique; Explains advantages and drawbacks of the technique, given particular circumstances.

  4. Capacitance Measurement Methods for Integrated Sensor Applications

    Directory of Open Access Journals (Sweden)

    Alireza Hassanzadeh

    2013-09-01

    Full Text Available In this paper different measurement methods that have been used for integrated capacitance measurement are reviewed and their advantage and disadvantages are discussed. For the designers of high accuracy on chip integrated circuits for capacitive sensors, it is important to know which method will provide the best approach for high accuracy, small chip area and power consumption especially for array sensors. These methods include on chip capacitive sensor and transducer measurement techniques that have been implemented for low value capacitance evaluations using CMOS technology. After the best structure is known the designer can optimize the chip for specific application. Voltage mode and current mode, linear and switched mode techniques are reviewed and a useful comparison table comparing all figures of merit including accuracy, range of measurement, chip area, speed and complexity is provided. The provided comparison table can be used as a reference for analog designers in the design of high accuracy integrated capacitive sensor interface

  5. Integrated micromachined transmission lines and endfire slotline antennas

    Science.gov (United States)

    Gearhart, Steven S.; Willke, Theodore L.; Onggosanusi, Eko N.

    1997-09-01

    An entirely new class of micromachined 3D microwave and millimeter-wave integrated circuits and antennas are being developed at the University of Wisconsin-Madison using a subset o the LIGA micromachining process. The deep x-ray lithography and metal plating portions of the LIGA process are used to precisely form tall metal structures on semiconductor and dielectric substrates. This micromachining process allows metal height to be included as a parameter in the design of integrated circuits, which will permit several important advancements in high frequency waveguiding circuits and integrated antennas. With appropriate thick- metal cross-sectional geometry, transmission line losses and dispersion may both be reduced on a given substrate. Vertical-walled metal structures allow increased control over element-to-element coupling for integrated coupled-line filters and couplers and result in very significant reductions in ohmic loss. It will be demonstrated that the first single-level coupled-line 3dB coupler can be fabricated using the LIGA process. In addition, the mechanical properties of the thick metal structures will be utilized in the fabrication of integrated antennas and transmission lines that are unsupported by a dielectric substrate. The elimination of the substrate beneath antennas reduces losses to substrate modes, and the elimination o the substrate beneath transmission line filters is necessary for extremely high Q integrated filters. This paper will present simulated loss results that demonstrate the advantages of thick metal transmission lines, measured results of a coupled-line bandpass filter, and a recently fabricated thick-metal tapered slotline antenna which extends nearly a centimeter off of the edge of a GaAs wafer.

  6. Electrochemical mechanical micromachining based on confined etchant layer technique.

    Science.gov (United States)

    Yuan, Ye; Han, Lianhuan; Zhang, Jie; Jia, Jingchun; Zhao, Xuesen; Cao, Yongzhi; Hu, Zhenjiang; Yan, Yongda; Dong, Shen; Tian, Zhong-Qun; Tian, Zhao-Wu; Zhan, Dongping

    2013-01-01

    The confined etchant layertechnique (CELT) has been proved an effective electrochemical microfabrication method since its first publication at Faraday Discussions in 1992. Recently, we have developed CELT as an electrochemical mechanical micromachining (ECMM) method by replacing the cutting tool used in conventional mechanical machining with an electrode, which can perform lathing, planing and polishing. Through the coupling between the electrochemically induced chemical etching processes and mechanical motion, ECMM can also obtain a regular surface in one step. Taking advantage of CELT, machining tolerance and surface roughness can reach micro- or nano-meter scale.

  7. A broadband micro-machined far-infrared absorber

    Science.gov (United States)

    Wollack, E. J.; Datesman, A. M.; Jhabvala, C. A.; Miller, K. H.; Quijada, M. A.

    2016-05-01

    The experimental investigation of a broadband far-infrared meta-material absorber is described. The observed absorptance is >0.95 from 1 to 20 THz (300-15 μm) over a temperature range spanning 5-300 K. The meta-material, realized from an array of tapers ≈100 μm in length, is largely insensitive to the detailed geometry of these elements and is cryogenically compatible with silicon-based micro-machined technologies. The electromagnetic response is in general agreement with a physically motivated transmission line model.

  8. A beam-membrane structure micromachined differential pressure flow sensor.

    Science.gov (United States)

    Chen, P; Zhao, Y L; Tian, B; Li, C; Li, Y Y

    2015-04-01

    A beam-membrane structure micromachined flow sensor is designed, depending on the principle of differential pressure caused by the mass flow, which is directly proportional to the square flow rate. The FSI (fluid structure interaction) characteristics of the differential pressure flow sensor are investigated via numerical analysis and analog simulation. The working mechanism of the flow sensor is analyzed depending on the FSI results. Then, the flow sensor is fabricated and calibrated. The calibration results show that the beam-membrane structure differential pressure flow sensor achieves ideal static characteristics and works well in the practical applications.

  9. A Broadband Micro-machined Far-Infrared Absorber

    CERN Document Server

    Wollack, Edward J; Jhabvala, Christine A; Miller, Kevin H; Quijada, Manuel A

    2016-01-01

    The experimental investigation of a broadband far-infrared meta-material absorber is described. The observed absorptance is $>\\,0.95$ from ${\\rm 1-20\\,THz}$ (${\\rm 300-15\\,\\mu m}$) over a temperature range spanning ${\\rm 5-300\\,K}$. The meta-material, realized from an array of tapers ${\\rm \\approx 100\\,\\mu m}$ in length, is largely insensitive to the detailed geometry of these elements and is cryogenically compatible with silicon-based micro-machined technologies. The electromagnetic response is in general agreement with a physically motivated transmission line model.

  10. Proton beam micromachining on PMMA, Foturan and CR-39 materials

    CERN Document Server

    Rajta, I; Kiss, A Z; Gomez-Morilla, I; Abraham, M H

    2003-01-01

    Proton Beam Micromachining was demonstrated at the Institute of Nuclear Research of the Hungarian Academy of Sciences using three different types of resists: PMMA, Foturan and CR-39 type Solid State Nuclear Track Detector material. Irradiations have been performed on the nuclear microprobe facility at ATOMKI. The beam scanning was done using a National Instruments (NI) card (model 6711), and the new C++ version of the program IonScan, developed specifically for PBM applications called IonScan 2.0. (R.P.)

  11. Pick-and-place process for sensitivity improvement of the capacitive type CMOS MEMS 2-axis tilt sensor

    Science.gov (United States)

    Chang, Chun-I.; Tsai, Ming-Han; Liu, Yu-Chia; Sun, Chih-Ming; Fang, Weileun

    2013-09-01

    This study exploits the foundry available complimentary metal-oxide-semiconductor (CMOS) process and the packaging house available pick-and-place technology to implement a capacitive type micromachined 2-axis tilt sensor. The suspended micro mechanical structures such as the spring, stage and sensing electrodes are fabricated using the CMOS microelectromechanical systems (MEMS) processes. A bulk block is assembled onto the suspended stage by pick-and-place technology to increase the proof-mass of the tilt sensor. The low temperature UV-glue dispensing and curing processes are employed to bond the block onto the stage. Thus, the sensitivity of the CMOS MEMS capacitive type 2-axis tilt sensor is significantly improved. In application, this study successfully demonstrates the bonding of a bulk solder ball of 100 µm in diameter with a 2-axis tilt sensor fabricated using the standard TSMC 0.35 µm 2P4M CMOS process. Measurements show the sensitivities of the 2-axis tilt sensor are increased for 2.06-fold (x-axis) and 1.78-fold (y-axis) after adding the solder ball. Note that the sensitivity can be further improved by reducing the parasitic capacitance and the mismatch of sensing electrodes caused by the solder ball.

  12. Ultrasonic materials characterization

    Science.gov (United States)

    Smith, R. L.

    1987-02-01

    The National NDT Center at Harwell has been developing methods for the characterization of materials using ultrasonics. This paper reviews the progress made in applying ultrasonic attenuation measurements to the determination of such quantities as grain size and dislocation content. A method, ultrasonic attenuation spectral analysis, has been developed, which enables the contributions of scattering and absorption to the total attenuation to be separated. The theoretical advances that have been made are also described. Some of the practical applications of the technique are illustrated and future development discussed.

  13. Ultrasonic washing of textiles.

    Science.gov (United States)

    Choi, Junhee; Kim, Tae-Hong; Kim, Ho-Young; Kim, Wonjung

    2016-03-01

    We present the results of experimental investigation of ultrasonic washing of textiles. The results demonstrate that cavitation bubbles oscillating in acoustic fields are capable of removing soils from textiles. Since the washing performance is mitigated in a large washing bath when using an ultrasonic transducer, we propose a novel washing scheme by combining the ultrasonic vibration with a conventional washing method utilizing kinetic energy of textiles. It is shown that the hybrid washing scheme achieves a markedly enhanced performance up to 15% in comparison with the conventional washing machine. This work can contribute to developing a novel laundry machine with reduced washing time and waste water.

  14. Sperm capacitation in the porcine oviduct.

    Science.gov (United States)

    Tienthai, P; Johannisson, A; Rodriguez-Martinez, H

    2004-01-01

    In vitro studies suggests that sperm capacitation occurs in the sperm reservoir (SR) of the pig, with spermatozoa progressing towards the ampullary-isthmic junction (AIJ) around ovulation as a consequence of capacitation/hyperactivation. In contrast, in vivo studies are scarce. Consequently, we determined the degree of capacitation in boar spermatozoa that were retrieved from the SR of sows at well-defined periods of spontaneous standing oestrus, namely pre-, peri- and post-ovulation, using flow cytometry of Merocyanine-540/Yo-Pro-1-loaded spermatozoa. SR-spermatozoa retrieved and incubated in non-capacitating medium (bicarbonate-free mBO [mBO-]) were largely viable (70-85%) and uncapacitated (69-73%), irrespective of the stage of oestrus considered. Those undergoing capacitation were a minor proportion (1-5%) during pre- and peri-ovulation, but they significantly increased (14%) in post-ovulation oestrus. To clarify whether these SR-spermatozoa were able to undergo capacitation under stimuli, sperm aliquots were challenged in vitro either by incubation in a bicarbonate-rich medium (capacitation medium, mBO+), then further in mBO+ with 20% (v/v) of in vivo collected homologous pre-ovulatory isthmic oviductal fluid (IOF), or incubation with hyaluronan (HA, 500 microg/ml). Exposure to mBO+ significantly increased the sub-population of capacitated spermatozoa from the pre- and peri-ovulation SR, indicating that the uncapacitated SR-spermatozoa were responsive to the effector/inducer bicarbonate at levels recorded in peri-ovulatory AIJ/ampulla in vivo. While addition of IOF or HA to SR-spermatozoa incubated in capacitating medium (mBO+) maintained sperm viability without obviously inducing capacitation in pre- or peri-ovulatory SR-spermatozoa, they significantly increased these percentages during post-ovulation, when compared to baseline values of control incubations (mBO-). The results suggest that massive sperm capacitation does not occur in vivo in the porcine SR

  15. Micromachined array-type Mirau interferometer for MEMS metrology

    Science.gov (United States)

    Gorecki, C.; Bargiel, S.; Albero, J.; Passilly, N.; Kujawinska, M.; Zeitner, U. D.

    We present the development of an array-type micromachined Mirau interferometers, operating in the regime of low coherence interferometry (LCI) and adapted for massively parallel inspection of MEMS. The system is a combination of free-space microoptical technologies and silicon micromachining, based on the vertical assembly of two glass wafers. The probing wafer is carrying an array of refractive microlenses, diffractive gratings to correct chromatic and spherical aberrations and reference micro-mirrors. The semitransparent beam splitter plate is based on the deposition of a dielectric multilayer, sandwiched between two glass wafers. The interferometer matrix is the key element of a novel inspection system aimed to perform parallel inspection of MEMS. The fabricated demonstrator, including 5x5 channels, allows consequently decreasing the measurement time by a factor of 25. In the following, the details of fabrication processes of the micro-optical components and their assembly are described. The feasibility of the LCI is demonstrated for the measurement of a wafer of MEMS sensors.

  16. Eye Vision Testing System and Eyewear Using Micromachines

    Directory of Open Access Journals (Sweden)

    Nabeel A. Riza

    2015-11-01

    Full Text Available Proposed is a novel eye vision testing system based on micromachines that uses micro-optic, micromechanic, and microelectronic technologies. The micromachines include a programmable micro-optic lens and aperture control devices, pico-projectors, Radio Frequency (RF, optical wireless communication and control links, and energy harvesting and storage devices with remote wireless energy transfer capabilities. The portable lightweight system can measure eye refractive powers, optimize light conditions for the eye under testing, conduct color-blindness tests, and implement eye strain relief and eye muscle exercises via time sequenced imaging. A basic eye vision test system is built in the laboratory for near-sighted (myopic vision spherical lens refractive error correction. Refractive error corrections from zero up to −5.0 Diopters and −2.0 Diopters are experimentally demonstrated using the Electronic-Lens (E-Lens and aperture control methods, respectively. The proposed portable eye vision test system is suited for children’s eye tests and developing world eye centers where technical expertise may be limited. Design of a novel low-cost human vision corrective eyewear is also presented based on the proposed aperture control concept. Given its simplistic and economical design, significant impact can be created for humans with vision problems in the under-developed world.

  17. Laser Beam MicroMachining (LBMM) - A review

    Science.gov (United States)

    Mishra, Sanjay; Yadava, Vinod

    2015-10-01

    The use of short and ultrashort laser pulses for micromachining application is an emerging technology. Laser Beam MicroMachining (LBMM) has revolutionized many industries by providing innovative solutions in numerous industrial micro-engineering applications. High-intensity short or ultrashort laser pulses are powerful thermal energy source for creating micro-features in wide range of materials. These lasers can precisely ablate various types of materials with little or no collateral damage. An overview of LBMM is given so that we can obtain a current view of capabilities and tradeoffs associated with LBMM of sub-micron size. The fundamental understanding of ultrafast laser ablation process has been elucidated and the various research activities performed with nanosecond, picosecond and femtosecond, lasers have been discussed to understand the physical mechanisms and the critical experimental parameters involved in the LBMM. The critical analysis of various theoretical and experimental models used to describe the performance analysis of LBMM has been elaborated so that we can identify the relevant principles underlying the process.

  18. Parametric studies on the nanosecond laser micromachining of the materials

    Science.gov (United States)

    Tański, M.; Mizeraczyk, J.

    2016-12-01

    In this paper the results of an experimental studies on nanosecond laser micromachining of selected materials are presented. Tested materials were thin plates made of aluminium, silicon, stainless steel (AISI 304) and copper. Micromachining of those materials was carried out using a solid state laser with second harmonic generation λ = 532 nm and a pulse width of τ = 45 ns. The effect of laser drilling using single laser pulse and a burst of laser pulses, as well as laser cutting was studied. The influence of laser fluence on the diameter and morphology of a post ablation holes drilled with a single laser pulse was investigated. The ablation fluence threshold (Fth) of tested materials was experimentally determined. Also the drilling rate (average depth per single laser pulse) of holes drilled with a burst of laser pulses was determined for all tested materials. The studies of laser cutting process revealed that a groove depth increases with increasing average laser power and decreasing cutting speed. It was also found that depth of the laser cut grooves is a linear function of number of repetition of a cut. The quantitative influence of those parameters on the groove depth was investigated.

  19. Metalworking with ultrasonic energy

    Science.gov (United States)

    Sonea, I.; Minca, M.

    1974-01-01

    The application of ultrasonic radiation for metal working of steel is discussed. It is stated that the productivity of the ultrasonic working is affected by the hardness of the material to be worked, the oscillation amplitude, the abrasive temperature, and the grain size. The factors that contribute to an increase in the dislocation speed are analyzed. Experimental data are provided to substantiate the theoretical parameters.

  20. Fundamentals of Medical Ultrasonics

    CERN Document Server

    Postema, Michiel

    2011-01-01

    This book sets out the physical and engineering principles of acoustics and ultrasound as used for medical applications. It covers the basics of linear acoustics, wave propagation, non-linear acoustics, acoustic properties of tissue, transducer components, and ultrasonic imaging modes, as well as the most common diagnostic and therapeutic applications. It offers students and professionals in medical physics and engineering a detailed overview of the technical aspects of medical ultrasonic imaging, whilst serving as a reference for clinical and research staff.

  1. Effect of surface asperities on the capacitances of capacitive RF MEMS switches

    Science.gov (United States)

    Chen, Zhiqiang; Tian, Wenchao; Zhang, Xiaotong

    2017-03-01

    The effects of surface asperities on the up- and down-state capacitances of the capacitive radio frequency (RF) micro electromechanical system (MEMS) switches were studied in this paper based on the single asperity model and statics. The research results demonstrated that surface asperities effects on the up-state capacitance could be neglected, whereas surface asperities must be taken into consideration at the down-state position in the RF MEMS switches because the surface asperities significantly affected the down-state capacitance. The down-state capacitance typically decreased as the root mean square (RMS) roughness and asperity radius increased. The down-state capacitance was approximately 26% of the theoretical value when the RMS roughness was 20 nm, and 32% of the theoretical value when the asperity radius was 100 nm. The experimental results were in good agreement with the simulation results.

  2. ULTRASONIC ASSEMBLY [REVIEW

    Directory of Open Access Journals (Sweden)

    PORAV Viorica

    2015-05-01

    Full Text Available The paper exposes the possibility of machine producesers to optimize the costs of clothes assembling. Ultrasonic systems being frequently utilized have many advantages on semi products of synthetic textile and technical textile. First of all, sewing – cutting process can be accomplished under high speeds and rate of losses can be minimized. Cutting seal applications are frequently used for underwear and sportswear. Slicing and unit cutting machines, as well as portable sealing machines are available for labeling sector. Products such as bag, pocket and cover can be sewed in a seamless manner for promotion purposes. All objects in terms of accessories are obtained in same standard. Our quilting machines are preferred in worldwide due to its threadless, high quality sealing. An alternative to the classic sewing assembly, with thread and needles is ultrasonic seaming. In ultrasonic welding, there are no connective bolts, nails, soldering materials, or adhesives necessary to bind the materials together. Ultrasonic is defined as acoustic frequencies above the range audible to the human ear. Ultrasonic frequencies are administered to the fabric from the sonotrode of bonding machine. The high frequency and powerful energy produced, when is release in one special environment, the ultrasound heating this environment. The ability to ultrasonic weld textiles and films depend on their thermoplastic contents and the desired end results. The paper defines the weld ability of more common textiles and films. The welding refers to all types of bonding and sealing, as in point bonding of fabric, or continuous sealing of film.

  3. Micro-Horn Arrays for Ultrasonic Impedance Matching

    Science.gov (United States)

    Rao, Shanti; Palmer, Dean

    2009-01-01

    Thin-layered structures containing arrays of micromachined horns, denoted solid micro-horn arrays (SMIHAs), have been conceived as improved means of matching acoustic impedances between ultrasonic transducers and the media with which the transducers are required to exchange acoustic energy. Typically, ultrasonic transducers (e.g., those used in medical imaging) are piezoelectric or similar devices, which produce small displacements at large stresses. However, larger displacements at smaller stresses are required in the target media (e.g., human tissues) with which acoustic energy is to be exchanged. Heretofore, efficiencies in transmission of acoustic energy between ultrasonic transducers and target media have been severely limited because substantial mismatches of acoustic impedances have remained, even when coupling material layers have been interposed between the transducers and the target media. In contrast, SMIHAs can, in principle, be designed to effect more nearly complete acoustic impedance matching, leading to power transmission efficiencies of 90 percent or even greater. The SMIHA concept is based on extension, into the higher-frequency/ lower-wavelength ultrasonic range, of the use of horns to match acoustic impedances in the audible and lower-frequency ultrasonic ranges. In matching acoustic impedance in transmission from a higher-impedance acoustic source (e.g., a piezoelectric transducer) and a lowerimpedance target medium (e.g., air or human tissue), a horn acts as a mechanical amplifier. The shape and size of the horn can be optimized for matching acoustic impedance in a specified frequency range. A typical SMIHA would consist of a base plate, a face plate, and an array of horns that would constitute pillars that connect the two plates (see figure). In use, the base plate would be connected to an ultrasonic transducer and the face plate would be placed in contact with the target medium. As at lower frequencies, the sizes and shapes of the pillars

  4. Capacitive Cells for Dielectric Constant Measurement

    Science.gov (United States)

    Aguilar, Horacio Munguía; Maldonado, Rigoberto Franco

    2015-01-01

    A simple capacitive cell for dielectric constant measurement in liquids is presented. As an illustrative application, the cell is used for measuring the degradation of overheated edible oil through the evaluation of their dielectric constant.

  5. Complementary surface charge for enhanced capacitive deionization

    NARCIS (Netherlands)

    Gao, X.; Porada, S.; Omosebi, A.; Liu, K.L.; Biesheuvel, P.M.; Landon, J.

    2016-01-01

    Commercially available activated carbon cloth electrodes are treated using nitric acid and ethylenediamine solutions, resulting in chemical surface charge enhanced carbon electrodes for capacitive deionization (CDI) applications. Surface charge enhanced electrodes are then configured in a CDI cel

  6. 100% foundry compatible packaging and full wafer release and die separation technique for surface micromachined devices

    Energy Technology Data Exchange (ETDEWEB)

    OLIVER,ANDREW D.; MATZKE,CAROLYN M.

    2000-04-06

    A completely foundry compatible chip-scale package for surface micromachines has been successfully demonstrated. A pyrex (Corning 7740) glass cover is placed over the released surface micromachined die and anodically bonded to a planarized polysilicon bonding ring. Electrical feedthroughs for the surface micromachine pass underneath the polysilicon sealing ring. The package has been found to be hermetic with a leak rate of less than 5 x 10{sup {minus}8} atm cm{sup {minus}3}/s. This technology has applications in the areas of hermetic encapsulation and wafer level release and die separation.

  7. Fatigue of micromachined stainless steel structural materials for vibrational energy harvesting

    Science.gov (United States)

    Shimizu, Y.; Van Minh, L.; Kitayoshi, H.; Kuwano, H.

    2016-11-01

    This work presents fatigue measurement for micromachined stainless steel (SUS304) structural substrate using resonant bending mode. Micromachined specimens for fatigue test had a cantilever structure with a proof mass. They were fabricated by FeCl3 wet etching and wire-discharged cutting. The SUS specimens had Young's modulus of 198 GPa on average. The endurance limit of micromachined specimens was 213 MPa on average after 108 cycles under our fracture definition. The large SUS specimens had the endurance limit of 229 MPa after 107 cycles.

  8. Micromachined Systems-on-a-Chip: Infrastructure, Technology and Applications

    Energy Technology Data Exchange (ETDEWEB)

    Allen, J. J.; Krygowski, T. W.; Miller, S. L.; Montague, S.; Rodgers, M. S.; Schriner, H.; Smith, J. H.; Sniegowski, J. J.

    1998-10-09

    A review is made of the infrastructure, technology and capabilities of Sandia National Laboratories for the development of micromechanical systems that have potential space applications. By incorporating advanced fabrication processes, such as chemical mechanical polishing, and several mechanical polysilicon levels, the range' of rrticromechanical systems that can be fabricated in these technologies is virtually limitless. Representative applications include a micro- engine driven mirror, and a micromachined lock. Using a novel integrated MEM!YCMOS technology, a six degree-of-freedom accelerometer/gyroscope system has been designed by researchers at U.C. Berkeley and fabricated on the same silicon chip as the CMOS control circuits to produce an integrated micro-navigational unit.

  9. Micromachined hot-wire thermal conductivity probe for biomedical applications.

    Science.gov (United States)

    Yi, Ming; Panchawagh, Hrishikesh V; Podhajsky, Ronald J; Mahajan, Roop L

    2009-10-01

    This paper presents the design, fabrication, numerical simulation, and experimental validation of a micromachined probe that measures thermal conductivity of biological tissues. The probe consists of a pair of resistive line heating elements and resistance temperature detector sensors, which were fabricated by using planar photolithography on a glass substrate. The numerical analysis revealed that the thermal conductivity and diffusivity can be determined by the temperature response induced by the uniform heat flux in the heating elements. After calibrating the probe using a material (agar gel) of known thermal conductivity, the probe was deployed to calculate the thermal conductivity of Crisco. The measured value is in agreement with that determined by the macro-hot-wire probe method to within 3%. Finally, the micro thermal probe was used to investigate the change of thermal conductivity of pig liver before and after RF ablation treatment. The results show an increase in thermal conductivity of liver after the RF ablation.

  10. A Micro-Machined Gyroscope for Rotating Aircraft

    Science.gov (United States)

    Yan, Qingwen; Zhang, Fuxue; Zhang, Wei

    2012-01-01

    In this paper we present recent work on the design, fabrication by silicon micromachining, and packaging of a new gyroscope for stabilizing the autopilot of rotating aircraft. It operates based on oscillation of the silicon pendulum between two torsion girders for detecting the Coriolis force. The oscillation of the pendulum is initiated by the rolling and deflecting motion of the rotating carrier. Therefore, the frequency and amplitude of the oscillation are proportional to the rolling frequency and deflecting angular rate of the rotating carrier, and are measured by the sensing electrodes. A modulated pulse with constant amplitude and unequal width is obtained by a linearizing process of the gyroscope output signal and used to control the deflection of the rotating aircraft. Experimental results show that the gyroscope has a resolution of 0.008 °/s and a bias of 56.18 °/h. PMID:23012572

  11. Dynamical modeling and characterization of a surface micromachined microengine

    Energy Technology Data Exchange (ETDEWEB)

    Miller, S.L.; Sniegowski, J.J.; LaVigne, G.L.; McWhorter, P.J.

    1996-01-01

    The practical implementation of the surface micromachined microengine [1,2] to perform useful microactuation tasks requires a thorough understanding of the dynamics of the engine. This understanding is necessary in order to create appropriate drive signals, and to experimentally measure fundamental quantities associated with the engine system. We have developed and applied a dynamical model of the microengine and used it to accomplish three objectives: (1) drive inertial loads in a controlled fashion, i.e. specify and achieve a desired time dependent angular position of the output gear,( 2) minimize stress and frictional forces during operation, and (3) as a function of time, experimentally determine forces associated with the output gear, such as the load torque being applied to the output gear due to friction.

  12. Solid polymer electrolyte composite membrane comprising laser micromachined porous support

    Science.gov (United States)

    Liu, Han; LaConti, Anthony B.; Mittelsteadt, Cortney K.; McCallum, Thomas J.

    2011-01-11

    A solid polymer electrolyte composite membrane and method of manufacturing the same. According to one embodiment, the composite membrane comprises a rigid, non-electrically-conducting support, the support preferably being a sheet of polyimide having a thickness of about 7.5 to 15 microns. The support has a plurality of cylindrical pores extending perpendicularly between opposing top and bottom surfaces of the support. The pores, which preferably have a diameter of about 5 microns, are made by laser micromachining and preferably are arranged in a defined pattern, for example, with fewer pores located in areas of high membrane stress and more pores located in areas of low membrane stress. The pores are filled with a first solid polymer electrolyte, such as a perfluorosulfonic acid (PFSA) polymer. A second solid polymer electrolyte, which may be the same as or different than the first solid polymer electrolyte, may be deposited over the top and/or bottom of the first solid polymer electrolyte.

  13. A silicon micromachined piezoresistive accelerometer for health and condition monitoring

    Science.gov (United States)

    Walsh, Kevin M.; Henderson, H. Thurman

    1990-01-01

    Silicon micromachining etching techniques were utilized to batch-fabricate hundreds of general purpose microaccelerometers on a single silicon substrate. Piezoresistive sensing elements were aligned to the back-side patterns using an IR mask aligner and then diffused into the areas of maximum stress. Capping of the two-arm cantilever beam structure was achieved using a combination of electrostatic bonding and low temperature glass films. Overrange protection, critical damping, and overall protection from the outside environment are achieved by controlling the cavity depths of the top and bottom covers. Temperature compensation, amplification, and filtering are performed by a companion LSI chip that is interfaced to the accelerometer by conventional wire-bonding techniques.

  14. Micromachined high-performance RF passives in CMOS substrate

    Science.gov (United States)

    Li, Xinxin; Ni, Zao; Gu, Lei; Wu, Zhengzheng; Yang, Chen

    2016-11-01

    This review systematically addresses the micromachining technologies used for the fabrication of high-performance radio-frequency (RF) passives that can be integrated into low-cost complementary metal-oxide semiconductor (CMOS)-grade (i.e. low-resistivity) silicon wafers. With the development of various kinds of post-CMOS-compatible microelectromechanical systems (MEMS) processes, 3D structural inductors/transformers, variable capacitors, tunable resonators and band-pass/low-pass filters can be compatibly integrated into active integrated circuits to form monolithic RF system-on-chips. By using MEMS processes, including substrate modifying/suspending and LIGA-like metal electroplating, both the highly lossy substrate effect and the resistive loss can be largely eliminated and depressed, thereby meeting the high-performance requirements of telecommunication applications.

  15. Experimental Investigation on Complex Structures Machining by Electrochemical Micromachining Technology

    Institute of Scientific and Technical Information of China (English)

    Liu Yong; Zhu Di; Zeng Yongbin; Huang Shaofu; Yu Hongbing

    2010-01-01

    Electrochemical micromachining(EMM)technology for fabricating micro structures is presented in this article.By applying ultra short pulses,dissolution of a workpiece can be restricted to the region very close to the electrode.First,an EMM system for meeting the requirements of the EMM process is established.Second,sets of experiments is carried out to investigate the influence of some of the predominant electrochemical process parameters such as electrical parameters,feed rate,electrode geometry features and electrolyte composition on machining quality,especially the influences of pulse on time on shape precision and working end shape of electrode on machined surface quality.Finally,after the preliminary experiments,a complex microstructure with good shape precision and surface quality is successfully obtained.

  16. A Micromachined Piezoresistive Pressure Sensor with a Shield Layer.

    Science.gov (United States)

    Cao, Gang; Wang, Xiaoping; Xu, Yong; Liu, Sheng

    2016-08-13

    This paper presents a piezoresistive pressure sensor with a shield layer for improved stability. Compared with the conventional piezoresistive pressure sensors, the new one reported in this paper has an n-type shield layer that covers p-type piezoresistors. This shield layer aims to minimize the impact of electrical field and reduce the temperature sensitivity of piezoresistors. The proposed sensors have been successfully fabricated by bulk-micromachining techniques. A sensitivity of 0.022 mV/V/kPa and a maximum non-linearity of 0.085% FS are obtained in a pressure range of 1 MPa. After numerical simulation, the role of the shield layer has been experimentally investigated. It is demonstrated that the shield layer is able to reduce the drift caused by electrical field and ambient temperature variation.

  17. Compact Micromachined Infrared Bandpass Filters for Planetary Spectroscopy

    Science.gov (United States)

    Merrell, Willie C., II; Aslam, Shahid; Brown, Ari D.; Chervenak, James A.; Huang, Wei-Chung; Quijada, Manuel; Wollack, Edward

    2011-01-01

    The future needs of space based observational planetary and astronomy missions include low mass and small volume radiometric instruments that can operate in high radiation and low temperature environments. Here we focus on a central spectroscopic component, the bandpass filter. We model the bandpass response of the filters to target the wavelength of the resonance peaks at 20, 40, and 60 micrometers and report good agreement between the modeled and measured response. We present a technique of using common micromachining processes for semiconductor fabrication to make compact, free standing resonant metal mesh filter arrays with silicon support frames. The process can accommodate multiple detector array architectures and the silicon frame provides lightweight mechanical support with low form factor. We also present a conceptual hybridization of the filters with a detector array.

  18. A Micro-Machined Gyroscope for Rotating Aircraft

    Directory of Open Access Journals (Sweden)

    Fuxue Zhang

    2012-07-01

    Full Text Available In this paper we present recent work on the design, fabrication by silicon micromachining, and packaging of a new gyroscope for stabilizing the autopilot of rotating aircraft. It operates based on oscillation of the silicon pendulum between two torsion girders for detecting the Coriolis force. The oscillation of the pendulum is initiated by the rolling and deflecting motion of the rotating carrier. Therefore, the frequency and amplitude of the oscillation are proportional to the rolling frequency and deflecting angular rate of the rotating carrier, and are measured by the sensing electrodes. A modulated pulse with constant amplitude and unequal width is obtained by a linearizing process of the gyroscope output signal and used to control the deflection of the rotating aircraft. Experimental results show that the gyroscope has a resolution of 0.008 °/s and a bias of 56.18 °/h.

  19. Ultrasonics in Dentistry

    Science.gov (United States)

    Walmsley, A. D.

    Ultrasonic instruments have been used in dentistry since the 1950's. Initially they were used to cut teeth but very quickly they became established as an ultrasonic scaler which was used to remove deposits from the hard tissues of the tooth. This enabled the soft tissues around the tooth to return to health. The ultrasonic vibrations are generated in a thin metal probe and it is the working tip that is the active component of the instrument. Scanning laser vibrometry has shown that there is much variability in their movement which is related to the shape and cross sectional shape of the probe. The working instrument will also generate cavitation and microstreaming in the associated cooling water. This can be mapped out along the length of the instrument indicating which are the active areas. Ultrasonics has also found use for cleaning often inaccessible or different surfaces including root canal treatment and dental titanium implants. The use of ultrasonics to cut bone during different surgical techniques shows considerable promise. More research is indicated to determine how to maximize the efficiency of such instruments so that they are more clinically effective.

  20. Characterization of a new class of surface micromachined pumps.

    Energy Technology Data Exchange (ETDEWEB)

    Galambos, Paul C.

    2004-12-01

    This is the latest in a series of LDRD's that we have been conducting with Florida State University/Florida A&M University (FSU/FAMU) under the campus executive program. This research builds on the earlier projects; ''Development of Highly Integrated Magnetically and Electrostatically Actuated Micropumps'' (SAND2003-4674) and ''Development of Magnetically and Electrostatically Driven Surface Micromachined Pumps'' (SAND2002-0704P). In this year's LDRD we designed 2nd generation of surface micromachined (SMM) gear and viscous pumps. Two SUMMiT{trademark} modules full of design variations of these pumps were fabricated and one SwIFT{trademark} module is still in fabrication. The SwIFT{trademark} fabrication process results in a transparent pump housing cover that will enable visualization inside the pumps. Since the SwIFT{trademark} pumps have not been tested as they are still in fabrication, this report will focus on the 2nd generation SUMMiT{trademark} designs. Pump testing (pressure vs. flow) was conducted on several of the SUMMiT{trademark} designs resulting in the first pump curve for this class of SMM pumps. A pump curve was generated for the higher torque 2nd generation gear pump designed by Jason Hendrix of FSU. The pump maximum flow rate at zero head was 6.5 nl/s for a 30V, 30 Hz square wave signal. This level of flow rate would be more than adequate for our typical SMM SUMMiT{trademark} or SwIFT{trademark} channels which have typical volumes on the order of 50 pl.

  1. Carbon flow electrodes for continuous operation of capacitive deionization and capacitive mixing energy generation

    NARCIS (Netherlands)

    Porada, S.; Hamelers, H.V.M.; Bryjak, M.; Presser, V.; Biesheuvel, P.M.; Weingarth, D.

    2014-01-01

    Capacitive technologies, such as capacitive deionization and energy harvesting based on mixing energy (“capmix” and “CO2 energy”), are characterized by intermittent operation: phases of ion electrosorption from the water are followed by system regeneration. From a system application point of view, c

  2. Artificial Intelligence Assists Ultrasonic Inspection

    Science.gov (United States)

    Schaefer, Lloyd A.; Willenberg, James D.

    1992-01-01

    Subtle indications of flaws extracted from ultrasonic waveforms. Ultrasonic-inspection system uses artificial intelligence to help in identification of hidden flaws in electron-beam-welded castings. System involves application of flaw-classification logic to analysis of ultrasonic waveforms.

  3. Ultrasonic Processing of Materials

    Science.gov (United States)

    Han, Qingyou

    2015-08-01

    Irradiation of high-energy ultrasonic vibration in metals and alloys generates oscillating strain and stress fields in solids, and introduces nonlinear effects such as cavitation, acoustic streaming, and radiation pressure in molten materials. These nonlinear effects can be utilized to assist conventional material processing processes. This article describes recent research at Oak Ridge National Labs and Purdue University on using high-intensity ultrasonic vibrations for degassing molten aluminum, processing particulate-reinforced metal matrix composites, refining metals and alloys during solidification process and welding, and producing bulk nanostructures in solid metals and alloys. Research results suggest that high-intensity ultrasonic vibration is capable of degassing and dispersing small particles in molten alloys, reducing grain size during alloy solidification, and inducing nanostructures in solid metals.

  4. Geothermal Ultrasonic Fracture Imager

    Energy Technology Data Exchange (ETDEWEB)

    Patterson, Doug [Baker-Hughes Oilfield Operation Inc., Houston, TX (United States); Leggett, Jim [Baker-Hughes Oilfield Operation Inc., Houston, TX (United States)

    2013-07-29

    The Geothermal Ultrasonic Fracture Imager project has a goal to develop a wireline ultrasonic imager that is capable of operating in temperatures up to 300°C (572°F) and depths up to 10 km (32,808 ft). This will address one of the critical needs in any EGS development of understanding the hydraulic flow paths in the reservoir. The ultrasonic imaging is well known in the oil and gas industry as one of the best methods for fracture evaluation; providing both high resolution and complete azimuthal coverage of the borehole. This enables fracture detection and characterization, both natural and induced, providing information as to their location, dip direction and dip magnitude. All of these factors are critical to fully understand the fracture system to enable the optimization of the thermal drainage through injectors and producers in a geothermal resource.

  5. Ultrasonic colour Doppler imaging

    DEFF Research Database (Denmark)

    Evans, David H; Jensen, Jørgen Arendt; Nielsen, Michael Bachmann

    2011-01-01

    anatomy. The most common use of the technique is to image the movement of blood through the heart, arteries and veins, but it may also be used to image the motion of solid tissues such as the heart walls. Colour Doppler imaging is now provided on almost all commercial ultrasound machines, and has been......Ultrasonic colour Doppler is an imaging technique that combines anatomical information derived using ultrasonic pulse-echo techniques with velocity information derived using ultrasonic Doppler techniques to generate colour-coded maps of tissue velocity superimposed on grey-scale images of tissue...... vectors. This review briefly introduces the principles behind colour Doppler imaging and describes some clinical applications. It then describes the basic components of conventional colour Doppler systems and the methods used to derive velocity information from the ultrasound signal. Next, a number of new...

  6. Ultrasonic Stir Welding

    Science.gov (United States)

    Nabors, Sammy

    2015-01-01

    NASA Marshall Space Flight Center (MSFC) developed Ultrasonic Stir Welding (USW) to join large pieces of very high-strength metals such as titanium and Inconel. USW, a solid-state weld process, improves current thermal stir welding processes by adding high-power ultrasonic (HPU) energy at 20 kHz frequency. The addition of ultrasonic energy significantly reduces axial, frictional, and shear forces; increases travel rates; and reduces wear on the stir rod, which results in extended stir rod life. The USW process decouples the heating, stirring, and forging elements found in the friction stir welding process allowing for independent control of each process element and, ultimately, greater process control and repeatability. Because of the independent control of USW process elements, closed-loop temperature control can be integrated into the system so that a constant weld nugget temperature can be maintained during welding.

  7. Ion channels, phosphorylation and mammalian sperm capacitation

    Institute of Scientific and Technical Information of China (English)

    Pablo E Visconti; Dario Krapf; José Luis de la Vega-Beltrán; Juan José Acevedo; Alberto Darszon

    2011-01-01

    Sexually reproducing animals require an orchestrated communication between spermatozoa and the egg to generate a new individual. Capacitation, a maturational complex phenomenon that occurs in the female reproductive tract, renders spermatozoa capable of binding and fusing with the oocyte, and it is a requirement for mammalian fertilization. Capacitation encompasses plasma membrane reorganization, ion permeability regulation, cholesterol loss and changes in the phosphorylation state of many proteins. Novel tools to study sperm ion channels, image intracellular ionic changes and proteins with better spatial and temporal resolution, are unraveling how modifications in sperm ion transport and phosphorylation states lead to capacitation. Recent evidence indicates that two parallel pathways regulate phosphorylation events leading to capacitation, one of them requiring activation of protein kinase A and the second one involving inactivation of ser/thr phosphatases. This review examines the involvement of ion transporters and phosphorylation signaling processes needed for spermatozoa to achieve capacitation. Understanding the molecular mechanisms leading to fertilization is central for societies to deal with rising male infertility rates, to develop safe male gamete-based contraceptives and to preserve biodiversity through better assisted fertilization strategies.

  8. Ion channels, phosphorylation and mammalian sperm capacitation.

    Science.gov (United States)

    Visconti, Pablo E; Krapf, Dario; de la Vega-Beltrán, José Luis; Acevedo, Juan José; Darszon, Alberto

    2011-05-01

    Sexually reproducing animals require an orchestrated communication between spermatozoa and the egg to generate a new individual. Capacitation, a maturational complex phenomenon that occurs in the female reproductive tract, renders spermatozoa capable of binding and fusing with the oocyte, and it is a requirement for mammalian fertilization. Capacitation encompasses plasma membrane reorganization, ion permeability regulation, cholesterol loss and changes in the phosphorylation state of many proteins. Novel tools to study sperm ion channels, image intracellular ionic changes and proteins with better spatial and temporal resolution, are unraveling how modifications in sperm ion transport and phosphorylation states lead to capacitation. Recent evidence indicates that two parallel pathways regulate phosphorylation events leading to capacitation, one of them requiring activation of protein kinase A and the second one involving inactivation of ser/thr phosphatases. This review examines the involvement of ion transporters and phosphorylation signaling processes needed for spermatozoa to achieve capacitation. Understanding the molecular mechanisms leading to fertilization is central for societies to deal with rising male infertility rates, to develop safe male gamete-based contraceptives and to preserve biodiversity through better assisted fertilization strategies.

  9. Ultrasonic magnetic abrasive finishing

    Institute of Scientific and Technical Information of China (English)

    LU Ya-ping; MA Ji; ZHANG Jun-qiang; WANG Long-shan

    2006-01-01

    Put forward a new kind of polishing method, ultrasonic magnetic abrasive finishing (UMAF), and studied its mechanism of improving polishing efficiency. By analyzing all kind of forces acting on single abrasive particle in the polishing process and calculating the size of the composition of forces, get the conclusion that UMAF will enhance the efficiency of the normal magnetic abrasive finishing(MAF) due to the ultrasonic vibration increases the cutting force and depth. At last the idea of designing the UMAF system based on numerical control milling machine is put forward which is convenient to setup and will accelerate the practical application of MAF.

  10. Ultrasonic/Sonic Jackhammer

    Science.gov (United States)

    Bar-Cohen, Yoseph; Sherrit, Stewart; Herz, Jack

    2005-01-01

    An ultrasonic/sonic jackhammer (USJ) is the latest in a series of related devices. Each of these devices cuts into a brittle material by means of hammering and chiseling actions of a tool bit excited with a combination of ultrasonic and sonic vibrations. A small-scale prototype of the USJ has been demonstrated. A fully developed, full-scale version of the USJ would be used for cutting through concrete, rocks, hard asphalt, and other materials to which conventional pneumatic jackhammers are applied, but the USJ would offer several advantages over conventional pneumatic jackhammers.

  11. Carbon nanofiber supercapacitors with large areal capacitances

    KAUST Repository

    McDonough, James R.

    2009-01-01

    We develop supercapacitor (SC) devices with large per-area capacitances by utilizing three-dimensional (3D) porous substrates. Carbon nanofibers (CNFs) functioning as active SC electrodes are grown on 3D nickel foam. The 3D porous substrates facilitate a mass loading of active electrodes and per-area capacitance as large as 60 mg/ cm2 and 1.2 F/ cm2, respectively. We optimize SC performance by developing an annealing-free CNF growth process that minimizes undesirable nickel carbide formation. Superior per-area capacitances described here suggest that 3D porous substrates are useful in various energy storage devices in which per-area performance is critical. © 2009 American Institute of Physics.

  12. Microphonics in biopotential measurements with capacitive electrodes.

    Science.gov (United States)

    Luna-Lozano, Pablo S; Pallas-Areny, Ramon

    2010-01-01

    Biopotential measurements with capacitive electrodes do not need any direct contact between electrode and skin, which saves the time devoted to expose and prepare the contact area when measuring with conductive electrodes. However, mechanical vibrations resulting from physiological functions such as respiration and cardiac contraction can change the capacitance of the electrode and affect the recordings. This transformation of mechanical vibrations into undesired electric signals is termed microphonics. We have evaluated microphonics in capacitive ECG recordings obtained from a dressed subject seated on a common chair with electrodes placed on the front side of the backrest of the chair. Depending on the softness of the backrest, the recordings may be clearly affected by the displacement of the thorax back wall due to the respiration and to the heart's mechanical activity.

  13. Role of the oviduct in sperm capacitation.

    Science.gov (United States)

    Rodriguez-Martinez, H

    2007-09-01

    Following insemination of spermatozoa pre-ovulation, the mammalian oviduct ensures, by the formation of a functional sperm reservoir (SR), that suitable (low) numbers of viable and potentially fertile spermatozoa are available for fertilization at the ampullary isthmic junction (AIJ). As ovulation approaches, a proportion of the SR-stored spermatozoa is continuously distributed towards the AIJ and individually activated leading to step-wise capacitation and the attainment of hyperactivated motility. This paper reviews in vivo changes in the intra-luminal milieu of the oviduct of pigs and cows, in particular the SR and the AIJ which relate to the modulation of sperm capacitation around spontaneous ovulation. In vivo, most viable spermatozoa in the pre-ovulatory SR are uncapacitated. Capacitation rates significantly increase after ovulation, apparently not massively but concurrent with the individual, continuous sperm dislocation from the SR. Bicarbonate, whose levels differ between the SR and the AIJ, appears as the common primary effector of the membrane destabilizing changes that encompasses the first stages of capacitation. Sperm activation can be delayed or even reversed by co-incubation with membrane proteins of the tubal lining, isthmic fluid or specific tubal glycosaminoglycans, such as hyaluronan. Although the pattern of response to in vitro induction of sperm activation - capacitation in particular - is similar for all spermatozoa, the capacity and speed of the response is very individual. Such diversity in responsiveness among spermatozoa insures full sperm viability before ovulation and the presence of spermatozoa at different stages of capacitation at the AIJ, thus maximizing the chances of normal fertilization.

  14. Capacitance sensor for automatic soil retreat measurements

    Institute of Scientific and Technical Information of China (English)

    GU Jun; YANG Juan; YIN Wu-liang; WANG Chao; WANG Hua-xiang; LIU Ze; CHENG Su-sen

    2008-01-01

    To continuously monitor the soil retreat due to erosion in field, provide valuable information about the erosion processes and overcome the disadvantages of inefficiency, high time-consumption and labor-intensity of existing methods, this paper describes a novel capacitance sensor for measuring the soil retreat. A capaci-tance sensor based probe is proposed, which can measure the depth of the soil around it automatically and the data can be recorded by a data logger. Experimental results in the lab verify its usefulness.

  15. Experimental study of negative capacitance in LEDs

    Institute of Scientific and Technical Information of China (English)

    FENG Lie-feng; WANG Jun; ZHU Chuan-yun; CONG Hong-xia; CHEN Yong; WANG Cun-da

    2005-01-01

    The experimental study on negative capacitance(NC) of various light-emitting diodes(LEDs) is presented.Experimental result shows that all LEDs display the NC phenomenon.The voltage modulated electroluminescence(VMEL) experiment confirms that the reason of negative capacitance is the strong recombination of the injected carriers in the active region of luminescence.The measures also verify that the dependence of NC on voltage and frequency in different LEDs is similar: NC phenomenon is more obvious with higher voltage or lower frequency.

  16. Ultrasonic effect on etching tunnel morphology and distribution of aluminum foil

    Science.gov (United States)

    Hu, Bin; Sun, Yanzi; Guan, Bing; Zhao, Jing; Zhang, Huaihao; Zhu, Deqiu; Ma, Kunsong; Cheng, Changjing

    2017-01-01

    Etching aluminum foil was prepared by electrochemical DC etching under ultrasonic superimposition. Specifically, the relationship of electrochemical behavior, interface behavior and mass transfer enhancement from ultrasound was investigated intensively by chronopotentiometry, potentiodynamic polarization, cyclic voltammetry and electrochemical impedance spectra. Meanwhile, the etching specimens were characterized by SEM, N2 adsorption and XRD patterns measurements. The results showed that ultrasonic agitation inhibited the growth of aluminum oxide film and facilitated pit initiation effectively via increasing the Cl- adsorption on electrolyte/aluminum oxide film interface, and strengthened the inward/outward migration of Cl- and AlCl3 within tunnels by thinning the thickness of diffusion layer and decreasing the electrolyte resistance. Moreover, the double layer capacitance Cdl, pit density, average pit size/tunnel length and its homogeneity are all enhanced under ultrasonic superimposition.

  17. Thermal Hysteresis of MEMS Packaged Capacitive Pressure Sensor (CPS) Based 3C-SiC

    Science.gov (United States)

    Marsi, N.; Majlis, B. Y.; Mohd-Yasin, F.; Hamzah, A. A.; Mohd Rus, A. Z.

    2016-11-01

    Presented herein are the effects of thermal hysteresis analyses of the MEMS packaged capacitive pressure sensor (CPS). The MEMS CPS was employed on Si-on-3C-SiC wafer that was performed using the hot wall low-pressure chemical vapour deposition (LPCVD) reactors at the Queensland Micro and Nanotechnology Center (QMNC), Griffith University and fabricated using the bulk-micromachining process. The MEMS CPS was operated at an extreme temperature up to 500°C and high external pressure at 5.0 MPa. The thermal hysteresis phenomenon that causes the deflection, strain and stress on the 3C-SiC diaphragm spontaneously influence the MEMS CPS performances. The differences of temperature, hysteresis, and repeatability test were presented to demonstrate the functionality of the MEMS packaged CPS. As expected, the output hysteresis has a low hysteresis (less than 0.05%) which has the hardness greater than the traditional silicon. By utilizing this low hysteresis, it was revealed that the MEMS packaged CPS has high repeatability and stability of the sensor.

  18. Locating Depots for Capacitated Vehicle Routing

    DEFF Research Database (Denmark)

    Gørtz, Inge Li; Nagarajan, Viswanath

    2011-01-01

    We study a location-routing problem in the context of capacitated vehicle routing. The input to k-LocVRP is a set of demand locations in a metric space and a fleet of k vehicles each of capacity Q. The objective is to locate k depots, one for each vehicle, and compute routes for the vehicles so...

  19. Thermodynamic cycle analysis for capacitive deionization

    NARCIS (Netherlands)

    Biesheuvel, P.M.

    2009-01-01

    Capacitive deionization (CDI) is an ion removal technology based on temporarily storing ions in the polarization layers of two oppositely positioned electrodes. Here we present a thermodynamic model for the minimum work required for ion separation in the fully reversible case by describing the ionic

  20. Negative capacitance in multidomain ferroelectric superlattices

    Science.gov (United States)

    Zubko, Pavlo; Wojdeł, Jacek C.; Hadjimichael, Marios; Fernandez-Pena, Stéphanie; Sené, Anaïs; Luk'Yanchuk, Igor; Triscone, Jean-Marc; Íñiguez, Jorge

    2016-06-01

    The stability of spontaneous electrical polarization in ferroelectrics is fundamental to many of their current applications, which range from the simple electric cigarette lighter to non-volatile random access memories. Research on nanoscale ferroelectrics reveals that their behaviour is profoundly different from that in bulk ferroelectrics, which could lead to new phenomena with potential for future devices. As ferroelectrics become thinner, maintaining a stable polarization becomes increasingly challenging. On the other hand, intentionally destabilizing this polarization can cause the effective electric permittivity of a ferroelectric to become negative, enabling it to behave as a negative capacitance when integrated in a heterostructure. Negative capacitance has been proposed as a way of overcoming fundamental limitations on the power consumption of field-effect transistors. However, experimental demonstrations of this phenomenon remain contentious. The prevalent interpretations based on homogeneous polarization models are difficult to reconcile with the expected strong tendency for domain formation, but the effect of domains on negative capacitance has received little attention. Here we report negative capacitance in a model system of multidomain ferroelectric-dielectric superlattices across a wide range of temperatures, in both the ferroelectric and paraelectric phases. Using a phenomenological model, we show that domain-wall motion not only gives rise to negative permittivity, but can also enhance, rather than limit, its temperature range. Our first-principles-based atomistic simulations provide detailed microscopic insight into the origin of this phenomenon, identifying the dominant contribution of near-interface layers and paving the way for its future exploitation.

  1. Inside-out electrical capacitance tomography

    DEFF Research Database (Denmark)

    Kjærsgaard-Rasmussen, Jimmy; Meyer, Knud Erik

    2011-01-01

    In this work we demonstrate the construction of an ‘inside-out’ sensor geometry for electrical capacitance tomography (ECT). The inside-out geometry has the electrodes placed around a tube, as usual, but measuring ‘outwards’. The flow between the electrodes and an outer tube is reconstructed...

  2. Investigation on a Novel Capacitive Electrode for Geophysical Surveys

    Directory of Open Access Journals (Sweden)

    Zhiyu Wang

    2016-01-01

    Full Text Available Nonpolarizable electrodes are applied widely in the electric field measurement for geophysical surveys. However, there are two major problems: (1 systematic errors caused by poor electrical contact in the high resistive terrains and (2 environmental damage associated with using nonpolarizable electrodes. A new alternative structure of capacitive electrode, which is capable of sensing surface potential through weak capacitive coupling, is presented to solve the above problems. A technique is introduced to neutralize distributed capacitance and input capacitance of the detection circuit. With the capacitance neutralization technique, the transmission coefficient of capacitive electrode remains stable when environmental conditions change. The simulation and field test results indicate that the new capacitive electrode has an operating bandwidth range from 0.1 Hz to 1 kHz. The capacitive electrodes have a good prospect of the applications in geophysical prospecting, especially in resistive terrains.

  3. Quantum capacitance of the armchair-edge graphene nanoribbon

    Indian Academy of Sciences (India)

    Ling-Feng Mao

    2013-08-01

    The quantum capacitance, an important parameter in the design of nanoscale devices, is derived for armchair-edge single-layer graphene nanoribbon with semiconducting property. The quantum capacitance oscillations are found and these capacitance oscillations originate from the lateral quantum confinement in graphene nanoribbon. Detailed studies of the capacitance oscillations demonstrate that the local channel electrostatic potential at the capacitance peak, the height and the number of the capacitance peak strongly depend on the width, especially a few nanometres, of the armchair-edge graphene nanoribbon. It implies that the capacitance oscillations observed in the experiments can be utilized to measure the width of graphene nanoribbon. The results also show that the capacitance oscillations are not seen when the width is larger than 30 nm.

  4. MOS Capacitance-Voltage Characteristics:V.Methods to Enhance the Trapping Capacitance

    Institute of Scientific and Technical Information of China (English)

    揭斌斌; 薩支唐

    2012-01-01

    Low-frequency and High-frequency Capacitance-Voltage (C-V) curves of Silicon Metal-Oxide-Semiconductor Capacitors,showing electron and hole trapping at shallow-level dopant and deep-level generationrecombination-trapping impurities,are presented to illustrate the enhancement of the giant trapping capacitances by physical means via device and circuit designs,in contrast to chemical means via impurity characteristics previously reported.Enhancement is realized by masking the electron or/and hole storage capacitances to make the trapping capacitances dominant at the terminals.Device and materials properties used in the computed CV curves are selected to illustrate experimental realizations for fundamental trapping parameter characterizations and for electrical and optical signal processing applications.

  5. Winding Capacitance Dividing Method for Powerformer

    Institute of Scientific and Technical Information of China (English)

    TIAN Qing; LIN Xiang-ning; LI Jian-jian; TAO Yong-hong

    2008-01-01

    It presents a method which can equivalently arrange the capacitance distribution along with the winding ofthe generator on the terminal and neutral respectively in a reasonable partition, particularly for a type of high-voltagegraded insulated cable wound generator, Powerformer. The winding of the Powerformer adopts graded insulation,which leads to the various cable thicknesses in different portion of the winding, and thus, the uneven capacitancedistribution. The large capacitive currents and large transient outrush currents resulting from the cable consisting ofthe stator winding of Powerformer may cause problems to the generator differential protection. Most of literatures a-vailable in the field of compensated differential protection focus on the charging current compensation for long trans-mission line, instead of for generator. The authors give a method which can be used to compensate the capacitivecurrent wholly to improve the reliability of the differential protection of Powerformer. It is proved that the distribu-ted capacitance can be equivalent as the lump circuit with a capacitance partition coefficient p, and p is proved as aconstant no matter whether the generator experiences the normal operation, external phase(s) fault or internal phase(s) fault. The formula of the partition coefficient is provided and the corresponding equivalent circuit of the Power-former cable to calculate capacitance currents is given. An analysis programming resolving the minimum value of thecoefficient p is written in MATLAB 7. 0/m according to this formula, using the function fmincon() which can workin any type of constraint condition. The program always gets the same global minimum points under the different in-itial values condition which proves our point by mathematical test. With this new approach to winding capacitancedividing method, the protection scheme used for Powerformer can be validated and improved accordingly.

  6. Manufacture of Radio Frequency Micromachined Switches with Annealing

    Directory of Open Access Journals (Sweden)

    Cheng-Yang Lin

    2014-01-01

    Full Text Available The fabrication and characterization of a radio frequency (RF micromachined switch with annealing were presented. The structure of the RF switch consists of a membrane, coplanar waveguide (CPW lines, and eight springs. The RF switch is manufactured using the complementary metal oxide semiconductor (CMOS process. The switch requires a post-process to release the membrane and springs. The post-process uses a wet etching to remove the sacrificial silicon dioxide layer, and to obtain the suspended structures of the switch. In order to improve the residual stress of the switch, an annealing process is applied to the switch, and the membrane obtains an excellent flatness. The finite element method (FEM software CoventorWare is utilized to simulate the stress and displacement of the RF switch. Experimental results show that the RF switch has an insertion loss of 0.9 dB at 35 GHz and an isolation of 21 dB at 39 GHz. The actuation voltage of the switch is 14 V.

  7. Manufacture of radio frequency micromachined switches with annealing.

    Science.gov (United States)

    Lin, Cheng-Yang; Dai, Ching-Liang

    2014-01-17

    The fabrication and characterization of a radio frequency (RF) micromachined switch with annealing were presented. The structure of the RF switch consists of a membrane, coplanar waveguide (CPW) lines, and eight springs. The RF switch is manufactured using the complementary metal oxide semiconductor (CMOS) process. The switch requires a post-process to release the membrane and springs. The post-process uses a wet etching to remove the sacrificial silicon dioxide layer, and to obtain the suspended structures of the switch. In order to improve the residual stress of the switch, an annealing process is applied to the switch, and the membrane obtains an excellent flatness. The finite element method (FEM) software CoventorWare is utilized to simulate the stress and displacement of the RF switch. Experimental results show that the RF switch has an insertion loss of 0.9 dB at 35 GHz and an isolation of 21 dB at 39 GHz. The actuation voltage of the switch is 14 V.

  8. Surface micromachined PDMS microfluidic devices fabricated using a sacrificial photoresist

    Science.gov (United States)

    Ganapathy Subramani, Balasubramanian; Selvaganapathy, Ponnambalam Ravi

    2009-01-01

    PDMS is a widely used material for construction of microfluidic devices. The traditional PDMS microfabrication process, although versatile, cannot be used to form microfluidic devices with embedded tall topological features, such as thick-film electrodes and porous reactor beds. This paper presents an elegant surface micromachining process for microfluidic devices that allows complete leak-proof sealing and a conformal contact of the PDMS with tall pre-existing topographical features and demonstrates this approach by embedding 6 µm thick Ag/AgCl (high capacity 1680 µA s) electrodes inside the microchannels. In this process, thin spin-cast films of the PDMS are used as the structural material and a photoresist is used as the sacrificial material. A crucial parameter, namely adhesion of the spun-cast structural layer to the substrate, was characterized for different pre-polymer ratios using a standard tensile test, and a 1:3 (curing agent:base) combination was found to be the best with a maximum adhesion strength of 7.2 MPa. The elastic property of the PDMS allowed extremely fast release times of ~1 min of the fabricated microchannels. The versatility of this process was demonstrated by the fabrication of a pneumatic microvalve with multi-layered microchannel geometry. The valve closure occurred at 6.37 kPa. Preliminary results of this paper have been presented at the Canadian Workshop on MEMS and Microfluidics, Montréal, Canada, August 2007.

  9. Thermal dependence of electrical characteristics of micromachined silica microchannel plates

    Science.gov (United States)

    Tremsin, Anton S.; Vallerga, John V.; Siegmund, Oswald H. W.; Beetz, Charles P.; Boerstler, Robert W.

    2004-04-01

    Micromachined silica microchannel plates (MCPs) under development have a number of advantages over standard glass MCPs and open completely new possibilities in detector technologies. In this article we present the results of our studies on the thermal properties of silica microchannel plates (sMCPs). Similar to standard glass microchanel plates the resistance of silica MCPs was measured to change exponentially with temperature with a negative thermal coefficient of -0.036 per °C, somewhat larger than that of standard glass MCPs. The resistance also decreases linearly with the applied voltage, with the voltage coefficient of -3.1×10-4 V-1. With the knowledge of these two coefficients, our thermal model allows the calculation of the maximum voltage, which can be applied to a given MCP without inducing a thermal runaway. A typical 25 mm diam, 240 μm thick sMCP with 6 μm pores has to have the resistance larger than ˜30 MΩ to operate safely at voltages up to 800 V. With this model we can also calculate the time required for a given silica MCP to reach the point of thermal equilibrium after a voltage increase. We hope that the ongoing efforts on a proper modification of the sMCP semiconducting layer will lead to the production of new MCPs with a small negative or even a positive thermal coefficient, reducing the possibility of thermal runaways of low-resistance MCPs required for high count rate applications.

  10. Thermoelectric Device Fabrication Using Thermal Spray and Laser Micromachining

    Science.gov (United States)

    Tewolde, Mahder; Fu, Gaosheng; Hwang, David J.; Zuo, Lei; Sampath, Sanjay; Longtin, Jon P.

    2016-02-01

    Thermoelectric generators (TEGs) are solid-state devices that convert heat directly into electricity. They are used in many engineering applications such as vehicle and industrial waste-heat recovery systems to provide electrical power, improve operating efficiency and reduce costs. State-of-art TEG manufacturing is based on prefabricated materials and a labor-intensive process involving soldering, epoxy bonding, and mechanical clamping for assembly. This reduces their durability and raises costs. Additive manufacturing technologies, such as thermal spray, present opportunities to overcome these challenges. In this work, TEGs have been fabricated for the first time using thermal spray technology and laser micromachining. The TEGs are fabricated directly onto engineering component surfaces. First, current fabrication techniques of TEGs are presented. Next, the steps required to fabricate a thermal spray-based TEG module, including the formation of the metallic interconnect layers and the thermoelectric legs are presented. A technique for bridging the air gap between two adjacent thermoelectric elements for the top layer using a sacrificial filler material is also demonstrated. A flat 50.8 mm × 50.8 mm TEG module is fabricated using this method and its performance is experimentally characterized and found to be in agreement with expected values of open-circuit voltage based on the materials used.

  11. Surface micromachined differential piezoelectric shear-stress sensors

    Science.gov (United States)

    Williams, Randall P.; Kim, Donghwan; Gawalt, David P.; Hall, Neal A.

    2017-01-01

    The ability to measure viscous wall shear stress in high-speed flows is important for verifying simulated results typically obtained from direct numerical simulation in the aerodynamics research community, and robust sensors are required to measure wall shear reliably under such high-speed conditions. This letter summarizes the design, fabrication, and testing of a surface micromachined piezoelectric shear-stress sensor which uses a thin piezoelectric film to generate a voltage proportional to an applied shear stress without additional moving parts. A differential-cell architecture is used to enhance selectivity to shear stress while canceling normal-stress sensitivity. The conceptual design, fabrication details, and experimental measurements of device sensitivity are presented. A finite element model is used to validate the device performance against measurements, and to provide insight into the potential and electric fields underlying the device concept. The potential for understanding device behavior and optimization through modeling is illustrated using finite element analysis results. The minimum detectable shear stress for the sensor is estimated to be 52.9 mPa  √Hz-1 at 1.5 kHz.

  12. Giant flexoelectric polarization in a micromachined ferroelectric diaphragm

    KAUST Repository

    Wang, Zhihong

    2012-08-14

    The coupling between dielectric polarization and strain gradient, known as flexoelectricity, becomes significantly large on the micro- and nanoscale. Here, it is shown that giant flexoelectric polarization can reverse remnant ferroelectric polarization in a bent Pb(Zr0.52Ti0.48) O3 (PZT) diaphragm fabricated by micromachining. The polarization induced by the strain gradient and the switching behaviors of the polarization in response to an external electric field are investigated by observing the electromechanical coupling of the diaphragm. The method allows determination of the absolute zero polarization state in a PZT film, which is impossible using other existing methods. Based on the observation of the absolute zero polarization state and the assumption that bending of the diaphragm is the only source of the self-polarization, the upper bound of flexoelectric coefficient of PZT film is calculated to be as large as 2.0 × 10-4 C m -1. The strain gradient induced by bending the diaphragm is measured to be on the order of 102 m-1, three orders of magnitude larger than that obtained in the bulk material. Because of this large strain gradient, the estimated giant flexoelectric polarization in the bent diaphragm is on the same order of magnitude as the normal remnant ferroelectric polarization of PZT film. Copyright © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

  13. Integrated Optical Interferometers with Micromachined Diaphragms for Pressure Sensing

    Science.gov (United States)

    DeBrabander, Gregory N.; Boyd, Joseph T.

    1996-01-01

    Optical pressure sensors have been fabricated which use an integrated optical channel waveguide that is part of an interferometer to measure the pressure-induced strain in a micromachined silicon diaphragm. A silicon substrate is etched from the back of the wafer leaving a rectangular diaphragm. On the opposite side of the wafer, ring resonator and Mach-Zehnder interferometers are formed with optical channel waveguides made from a low pressure chemical vapor deposited film of silicon oxynitride. The interferometer's phase is altered by pressure-induced stress in a channel segment positioned over the long edge of the diaphragm. The phase change in the ring resonator is monitored using a link-insensitive swept frequency laser diode, while in the Mach-Zehnder it is determined using a broad band super luminescent diode with subsequent wavelength separation. The ring resonator was found to be highly temperature sensitive, while the Mach-Zehnder, which had a smaller optical path length difference, was proportionally less so. The quasi-TM mode was more sensitive to pressure, in accord with calculations. Waveguide and sensor theory, sensitivity calculations, a fabrication sequence, and experimental results are presented.

  14. Femtosecond laser micromachining of fibre Bragg gratings for simultaneous measurement of temperature and concentration of liquids

    Energy Technology Data Exchange (ETDEWEB)

    Alemohammad, H; Toyserkani, E [Department of Mechanical and Mechatronics Engineering, University of Waterloo, ON N2L 3G1 (Canada); Pinkerton, A J [School of Mechanical, Aerospace and Civil Engineering, University of Manchester, PO Box 88, Manchester, M60 1QD (United Kingdom)], E-mail: etoyserk@uwaterloo.ca, E-mail: shalemoh@uwaterloo.ca, E-mail: andrew.pinkerton@manchester.ac.uk

    2008-09-21

    This paper is concerned with micromachining of optical fibre Bragg gratings (FBGs) using a femtosecond pulsed laser. The purpose of this work is to increase the sensitivity of FBGs for simultaneous monitoring of the concentration of chemicals and biological liquids and their temperature. A Ti : sapphire regenerative amplifier was utilized to inscribe micro-grooves with widths of 16 and 22 {mu}m in the cladding of the optical fibres. Due to the core-confined light propagation characteristics of FBGs, their sensitivity to the changes in the index of refraction of the surrounding medium is minimal. However, by creating micro-grooves in the cladding layer, the index of refraction of the surrounding medium becomes effective in the coupling of the propagating core modes. As the index of refraction of liquids depends on the composition and concentration, the FBG with micromachined cladding can provide enough sensitivity to be used in chemical sensing. The performance of the micromachined FBGs was investigated by immersing them in different liquid solutions of polyvinyl butyral (PVB) in ethanol and obtaining their thermal responses. Results showed that the optical response of the micromachined FBGs (i.e. red shift in Bragg wavelength) is different by up to 10% in PVB solutions in ethanol than in ethanol alone. The micromachined FBGs can be used to monitor the concentration as well as the temperature of a solution.

  15. Femtosecond laser micromachining of fibre Bragg gratings for simultaneous measurement of temperature and concentration of liquids

    Science.gov (United States)

    Alemohammad, H.; Toyserkani, E.; Pinkerton, A. J.

    2008-09-01

    This paper is concerned with micromachining of optical fibre Bragg gratings (FBGs) using a femtosecond pulsed laser. The purpose of this work is to increase the sensitivity of FBGs for simultaneous monitoring of the concentration of chemicals and biological liquids and their temperature. A Ti : sapphire regenerative amplifier was utilized to inscribe micro-grooves with widths of 16 and 22 µm in the cladding of the optical fibres. Due to the core-confined light propagation characteristics of FBGs, their sensitivity to the changes in the index of refraction of the surrounding medium is minimal. However, by creating micro-grooves in the cladding layer, the index of refraction of the surrounding medium becomes effective in the coupling of the propagating core modes. As the index of refraction of liquids depends on the composition and concentration, the FBG with micromachined cladding can provide enough sensitivity to be used in chemical sensing. The performance of the micromachined FBGs was investigated by immersing them in different liquid solutions of polyvinyl butyral (PVB) in ethanol and obtaining their thermal responses. Results showed that the optical response of the micromachined FBGs (i.e. red shift in Bragg wavelength) is different by up to 10% in PVB solutions in ethanol than in ethanol alone. The micromachined FBGs can be used to monitor the concentration as well as the temperature of a solution.

  16. Evaluation of multiple-channel OFDM based airborne ultrasonic communications.

    Science.gov (United States)

    Jiang, Wentao; Wright, William M D

    2016-09-01

    Orthogonal frequency division multiplexing (OFDM) modulation has been extensively used in both wired and wireless communication systems. The use of OFDM technology allows very high spectral efficiency data transmission without using complex equalizers to correct the effect of a frequency-selective channel. This work investigated OFDM methods in an airborne ultrasonic communication system, using commercially available capacitive ultrasonic transducers operating at 50kHz to transmit information through the air. Conventional modulation schemes such as binary phase shift keying (BPSK) and quadrature amplitude modulation (QAM) were used to modulate sub-carrier signals, and the performances were evaluated in an indoor laboratory environment. Line-of-sight (LOS) transmission range up to 11m with no measurable errors was achieved using BPSK at a data rate of 45kb/s and a spectral efficiency of 1b/s/Hz. By implementing a higher order modulation scheme (16-QAM), the system data transfer rate was increased to 180kb/s with a spectral efficiency of 4b/s/Hz at attainable transmission distances up to 6m. Diffraction effects were incorporated into a model of the ultrasonic channel that also accounted for beam spread and attenuation in air. The simulations were a good match to the measured signals and non-LOS signals could be demodulated successfully. The effects of multipath interference were also studied in this work. By adding cyclic prefix (CP) to the OFDM symbols, the bit error rate (BER) performance was significantly improved in a multipath environment.

  17. Introduction to ultrasonic motors

    Energy Technology Data Exchange (ETDEWEB)

    Sashida, Toshiiku; Kenjo, Takashi.

    1993-01-01

    The ultrasonic motor, invented in 1980, utilizes the piezoelectric effect in the ultrasonic frequency range to provide the motive force. (In conventional electric motors the motive force is electromagnetic.) The result is a motor with unusually good low-speed high-torque and power-to-weight characteristics. It has already found applications in camera autofocus mechanisms, medical equipment subject to high magnetic fields, and motorized car accessories. Its applications will increase as designers become more familiar with its unique characteristics. This book is the result of a collaboration between the inventor and an expert in conventional electric motors: the result is an introduction to the general theory presented in a way that links it to conventional motor theory. It will be invaluable both to motor designers and to those who design with and use electric motors as an introduction to this important new invention.

  18. Pulsed ultrasonic stir welding system

    Science.gov (United States)

    Ding, R. Jeffrey (Inventor)

    2013-01-01

    An ultrasonic stir welding system includes a welding head assembly having a plate and a rod passing through the plate. The rod is rotatable about a longitudinal axis thereof. During a welding operation, ultrasonic pulses are applied to the rod as it rotates about its longitudinal axis. The ultrasonic pulses are applied in such a way that they propagate parallel to the longitudinal axis of the rod.

  19. Ultrasonic techniques for process monitoring and control.

    Energy Technology Data Exchange (ETDEWEB)

    Chien, H.-T.

    1999-03-24

    Ultrasonic techniques have been applied successfully to process monitoring and control for many industries, such as energy, medical, textile, oil, and material. It helps those industries in quality control, energy efficiency improving, waste reducing, and cost saving. This paper presents four ultrasonic systems, ultrasonic viscometer, on-loom, real-time ultrasonic imaging system, ultrasonic leak detection system, and ultrasonic solid concentration monitoring system, developed at Argonne National Laboratory in the past five years for various applications.

  20. HIGHER FREQUENCY ULTRASONIC LIGHT MODULATORS.

    Science.gov (United States)

    LIGHT), (* MODULATORS , (*ULTRASONIC RADIATION, MODULATORS ), OPTICAL COMMUNICATIONS, BANDWIDTH, TRANSDUCERS, HIGH FREQUENCY, VERY HIGH FREQUENCY, ATTENUATION, DATA PROCESSING, OPTICAL EQUIPMENT, ANALOG COMPUTERS, THEORY.

  1. Ultrasonic investigations in intermetallics

    Indian Academy of Sciences (India)

    Devraj Singh; D K Pandey

    2009-02-01

    Ultrasonic attenuation for the longitudinal and shear waves due to phonon–phonon interaction and thermoelastic mechanism have been evaluated in B2 structured in-termetallic compounds AgMg, CuZr, AuMg, AuTi, AuMn, AuZn and AuCd along $\\langle 1 0 0 \\rangle, \\langle 1 1 1 \\rangle and \\langle 1 1 0 \\rangle crystallographic directions at room temperature. For the same evaluations, second- and third-order elastic constants, ultrasonic velocities, Grüneisen parameters, non-linearity parameter, Debye temperature and thermal relaxation time are also computed. Although the molecular weight of these materials increases from AgMg to AuCd, the obtained results are affected with the deviation number. Attenuation of ultrasonic waves due to phonon–phonon interaction is predominant over thermoelastic loss. Results are compared with available theoretical and experimental results. The results with other well-known physical properties are useful for industrial purposes.

  2. Ultrasonic Cutting of Foods

    Science.gov (United States)

    Schneider, Yvonne; Zahn, Susann; Rohm, Harald

    In the field of food engineering, cutting is usually classified as a mechanical unit operation dealing with size reduction by applying external forces on a bulk product. Ultrasonic cutting is realized by superpositioning the macroscopic feed motion of the cutting device or of the product with a microscopic vibration of the cutting tool. The excited tool interacts with the product and generates a number of effects. Primary energy concentration in the separation zone and the modification of contact friction along the tool flanks arise from the cyclic loading and are responsible for benefits such as reduced cutting force, smooth cut surface, and reduced product deformation. Secondary effects such as absorption and cavitation originate from the propagation of the sound field in the product and are closely related to chemical and physical properties of the material to be cut. This chapter analyzes interactions between food products and ultrasonic cutting tools and relates these interactions with physical and chemical product properties as well as with processing parameters like cutting velocity, ultrasonic amplitude and frequency, and tool design.

  3. Acoustical cross-talk in row–column addressed 2-D transducer arrays for ultrasound imaging

    DEFF Research Database (Denmark)

    Christiansen, Thomas Lehrmann; Jensen, Jørgen Arendt; Thomsen, Erik Vilain

    2015-01-01

    The acoustical cross-talk in row–column addressed 2-D transducer arrays for volumetric ultrasound imaging is investigated. Experimental results from a 2.7 MHz, λ/2-pitch capacitive micromachined ultrasonic transducer (CMUT) array with 62 rows and 62 columns are presented and analyzed in the frequ......The acoustical cross-talk in row–column addressed 2-D transducer arrays for volumetric ultrasound imaging is investigated. Experimental results from a 2.7 MHz, λ/2-pitch capacitive micromachined ultrasonic transducer (CMUT) array with 62 rows and 62 columns are presented and analyzed...

  4. THE SURFACE EFFECT ON THE TENSILE STRENGTH OF MICROMACHINED POLYSILICON FILMS FOR MEMS

    Institute of Scientific and Technical Information of China (English)

    Ding Jianning; Yang Jichang; Wen Shizhu

    2005-01-01

    In order to accomplish reliable mechanical design of MEMS, the influences of surface roughness and octadecyltrichlorosilane (OTS) self-assembled monolayers (SAMs) on the mechanical properties of micromachined polysilicon films for MEMS are investigated. Surface effect on the fracture properties of micromachined polysilicon films is evaluated with a new microtensile testing method using a magnet-coil force actuator. Statistical analysis of the surface roughness effects on the tensile strength predicated the surface roughness characterization of polysilicon films being tested and the direct relation of the mechanical properties with the surface roughness features. The fracture strength decreases with the increase of the surface roughness. The octadecyltrichlorosilane self-assembled monolayers coating leads to an increase of the average fracture strength up to 32.46%. Surface roughness and the hydrophobic properties of specimen when coated with OTS films are the two main factors influencing the tensile strength of micromachined polysilicon films for MEMS.

  5. Characteristics of damaged layer in micro-machining of copper material

    Institute of Scientific and Technical Information of China (English)

    Dong-Hee KWON; Jeong-Suk KIM; Myung-Chang KANG; Se-Hun KWON; Jong-Hwan LEE

    2009-01-01

    The study on damaged layer is necessary for improving the machinability in micro-machining because the damaged layer affects the micro mold life and micro machine parts. This study examined the ultra-precision micro-machining characteristics, such as cutting speed, feed rate and cutting depth, of a micro-damaged layer produced by an ultra-high speed air turbine spindle. The micro cutting force, surface roughness and plastic deformation layer were investigated according to the machining conditions. The damaged layer was measured using optical microscope on samples prepared through metallographic techniques. The scale of the damaged layer depends on the cutting process parameters, particularly, the feed per tooth and axial depth of the cut. According to the experimental results, the depth of the damaged layer is increased by increasing the feed per tooth and cutting depth, also the damaged layer occurs less in down-milling compared with up-milling during the micro-machining operation.

  6. Experimental and Theoretical Study of Young Modulus in Micromachined Polysilicon Films

    Institute of Scientific and Technical Information of China (English)

    丁建宁; 孟永钢; 温诗铸

    2002-01-01

    The elastic modulus is a very important mechanical property in micromachined structures. Several design issues such as resonant frequencies and stiffness in the micromachined structures are related to the elastic modulus. In addition, the accuracy of results from finite element models is highly dependent upon the elastic modulus. In this study, the Young modulus of micromachined thin polysilicon films has been investigated with a new tensile test machine using a magnetic-solenoid force actuator with linear response, low hysteresis, no friction and direct electrical control. The tensile test results show that the measured average value of Young modulus for a typical sample, (164±1.2) GPa, falls within the theoretical bounds of the texture model. These results will provide more reliable design of polysilicon microelectromechanical systems (MEMS).

  7. First reliability test of a surface micromachined microengine using SHiMMeR

    Energy Technology Data Exchange (ETDEWEB)

    Tanner, D.M.; Smith, N.F.; Bowman, D.J. [and others

    1997-08-01

    The first-ever reliability stress test on surface micromachined microengines developed at Sandia National Laboratories (SNL) has been completed. We stressed 41 microengines at 36,000 RPM and inspected the functionality at 60 RPM. We have observed an infant mortality region, a region of low failure rate (useful life), and no signs of wearout in the data. The reliability data are presented and interpreted using standard reliability methods. Failure analysis results on the stressed microengines are presented. In our effort to study the reliability of MEMS, we need to observe the failures of large numbers of parts to determine the failure modes. To facilitate testing of large numbers of micromachines. The Sandia High Volume Measurement of Micromachine Reliability (SHiMMeR) system has computer controlled positioning and the capability to inspect moving parts. The development of this parallel testing system is discussed in detail.

  8. The use of micromachined structures for the management of mechanical properties and adhesion of thin films

    Science.gov (United States)

    Mehregamy, Mehran; Allen, Mark G.; Senturia, Stephen D.

    The application of silicon micromachining to the measurement of mechanical properties of thin films such as intrinsic stress, Young's modulus, and adhesion is presented. The measurement is based on the deflection and subsequent peeling of suspended membrane sections of the film. The goal was to make a quantitatively reproducible adhesion test by applying micromachining techniques to the blister peel test described by Hinkley. The initial measurements demonstrated the importance of residual stress in the films, which resulted in an expanded emphasis on the basic mechanical properties of the membrane as a prelude to accurate adhesion measurements. The process for micromachining suspended membranes is discussed along with the theory leading to the determination of mechanical properties of the films, the results, and the present status of the adhesion work.

  9. Porous Alumina Based Capacitive MEMS RH Sensor

    CERN Document Server

    Juhasz, L; Timar-Horvath, Veronika; Desmulliez, Marc; Dhariwal, Resh

    2008-01-01

    The aim of a joint research and development project at the BME and HWU is to produce a cheap, reliable, low-power and CMOS-MEMS process compatible capacitive type relative humidity (RH) sensor that can be incorporated into a state-of-the-art, wireless sensor network. In this paper we discuss the preparation of our new capacitive structure based on post-CMOS MEMS processes and the methods which were used to characterize the thin film porous alumina sensing layer. The average sensitivity is approx. 15 pF/RH% which is more than a magnitude higher than the values found in the literature. The sensor is equipped with integrated resistive heating, which can be used for maintenance to reduce drift, or for keeping the sensing layer at elevated temperature, as an alternative method for temperature-dependence cancellation.

  10. The Pyramidal Capacitated Vehicle Routing Problem

    DEFF Research Database (Denmark)

    Lysgaard, Jens

    This paper introduces the Pyramidal Capacitated Vehicle Routing Problem (PCVRP) as a restricted version of the Capacitated Vehicle Routing Problem (CVRP). In the PCVRP each route is required to be pyramidal in a sense generalized from the Pyramidal Traveling Salesman Problem (PTSP). A pyramidal...... found in many optimal solutions to CVRP instances. An optimal solution to the PCVRP may therefore be useful in itself as a heuristic solution to the CVRP. Further, an attempt can be made to find an even better CVRP solution by solving a TSP, possibly leading to a non-pyramidal route, for each...... of the routes in the PCVRP solution. This paper develops an exact branch-and-cut-and-price (BCP) algorithm for the PCVRP. At the pricing stage, elementary routes can be computed in pseudo-polynomial time in the PCVRP, unlike in the CVRP. We have therefore implemented pricing algorithms that generate only...

  11. Automatic Power Factor Correction Using Capacitive Bank

    Directory of Open Access Journals (Sweden)

    Mr.Anant Kumar Tiwari,

    2014-02-01

    Full Text Available The power factor correction of electrical loads is a problem common to all industrial companies. Earlier the power factor correction was done by adjusting the capacitive bank manually [1]. The automated power factor corrector (APFC using capacitive load bank is helpful in providing the power factor correction. Proposed automated project involves measuring the power factor value from the load using microcontroller. The design of this auto-adjustable power factor correction is to ensure the entire power system always preserving unity power factor. The software and hardware required to implement the suggested automatic power factor correction scheme are explained and its operation is described. APFC thus helps us to decrease the time taken to correct the power factor which helps to increase the efficiency.

  12. CMOS Integrated Capacitive DC-DC Converters

    CERN Document Server

    Van Breussegem, Tom

    2013-01-01

    This book provides a detailed analysis of all aspects of capacitive DC-DC converter design: topology selection, control loop design and noise mitigation. Readers will benefit from the authors’ systematic overview that starts from the ground up, in-depth circuit analysis and a thorough review of recently proposed techniques and design methodologies.  Not only design techniques are discussed, but also implementation in CMOS is shown, by pinpointing the technological opportunities of CMOS and demonstrating the implementation based on four state-of-the-art prototypes.  Provides a detailed analysis of all aspects of capacitive DC-DC converter design;  Analyzes the potential of this type of DC-DC converter and introduces a number of techniques to unleash their full potential; Combines system theory with practical implementation techniques; Includes unique analysis of CMOS technology for this application; Provides in-depth analysis of four fabricated prototypes.

  13. Molecular-Scale Lubricants for Micromachine Applications: Final Report

    Energy Technology Data Exchange (ETDEWEB)

    Burns, A.R.; Dugger, M.T.; Houston, J.E.; Lopez, G.P.; Mayer, T.M.; Michalske, T.A.; Miller, S.L.; Sniegowski, J.J.; Stevens, M.J.; Zhou, Y.

    1998-12-01

    The nature of this work was to develop the physics and chemistry base for understanding molecular-scale lubricants used to reduce of friction- and adhesion-induced failure in silicon micromachines (MEMS). We acquired this new knowledge by tailoring the molecular properties of the lubricants, applying local probes that can directly monitor the response of lubricants in contact conditions, and evaluating the performance of model lubricants MEMS devices. Model lubricants under investigation were the silane coupling agents that form monolayer films on native oxide silicon surfaces, which is the substrate in MEMS. These molecules bind via strong surface bonds and produce a layer of hydro- or fluoro-carbon chains normal to the substrate. "Tailoring" the lubricants entails modifying the chain length, the chain chemical reactivity (H or F), and the density of chain structures. Thus much effort went into understanding the surface chemistry of silane-silicon oxide coupling. With proximal probes such as atomic force microscopy (AFM), interracial force microscopy (FM), and shear force microscopy in combination with IFM, we examined the frictional and adhesive properties of the silane films with very high spatial resolution (< 100 nm) and sensitivity. MEMS structures are treated with silanes under identical conditions, and examined for friction and adhesion under operating conditions. Proper assessment of the lubricants required quantitative analysis of MEMS performance at high speeds and long operating times. Our proximal probe measurements and WS performance analyses form a very important link for future molecular dynamics simulations, that, in turn, should be able to predict MEMS performance under all conditions.

  14. Micromachined fiber optic Fabry-Perot underwater acoustic probe

    Science.gov (United States)

    Wang, Fuyin; Shao, Zhengzheng; Hu, Zhengliang; Luo, Hong; Xie, Jiehui; Hu, Yongming

    2014-08-01

    One of the most important branches in the development trend of the traditional fiber optic physical sensor is the miniaturization of sensor structure. Miniature fiber optic sensor can realize point measurement, and then to develop sensor networks to achieve quasi-distributed or distributed sensing as well as line measurement to area monitoring, which will greatly extend the application area of fiber optic sensors. The development of MEMS technology brings a light path to address the problems brought by the procedure of sensor miniaturization. Sensors manufactured by MEMS technology possess the advantages of small volume, light weight, easy fabricated and low cost. In this paper, a fiber optic extrinsic Fabry-Perot interferometric underwater acoustic probe utilizing micromachined diaphragm collaborated with fiber optic technology and MEMS technology has been designed and implemented to actualize underwater acoustic sensing. Diaphragm with central embossment, where the embossment is used to anti-hydrostatic pressure which would largely deflect the diaphragm that induce interferometric fringe fading, has been made by double-sided etching of silicon on insulator. By bonding the acoustic-sensitive diaphragm as well as a cleaved fiber end in ferrule with an outer sleeve, an extrinsic Fabry-Perot interferometer has been constructed. The sensor has been interrogated by quadrature-point control method and tested in field-stable acoustic standing wave tube. Results have been shown that the recovered signal detected by the sensor coincided well with the corresponding transmitted signal and the sensitivity response was flat in frequency range from 10 Hz to 2kHz with the value about -154.6 dB re. 1/μPa. It has been manifest that the designed sensor could be used as an underwater acoustic probe.

  15. Micromachined infrared sensors with device-level encapsulation

    Science.gov (United States)

    Dave, Aasutosh; Celik-Butler, Zeynep; Butler, Donald P.

    2005-05-01

    There have been recent innovations to reduce the cost of packaging for MEMS devices, without deteriorating their performance. One such novel design for device-level encapsulation (self-packaged) of uncooled infrared (IR) microbolometers is documented here. Device-level vacuum encapsulation has the potential to eliminate some major problems associated with the bolometer performance such as high thermal conductance of the ambient atmosphere, the high cost associated with conventional vacuum packaging, and the degradation of optical transmission at different wavelengths through a conventional package window. The device-level encapsulated bolometers can also be fabricated with flexible substrates, which have the advantage of conforming to non-planar surfaces compared to Si or other rigid substrates. In addition, a flexible superstrate with low shear stress has applications in robotics, aerospace, defense and biomedicine as a "Smart skin", a name given to multisensory arrays on conformal substrates to emulate human skin functions on inanimate objects. Self-packaged uncooled microbolometer arrays of 40x40 μm2 and 60x60 μm2 are fabricated on top of Si wafer with a sacrificial layer using semiconducting Yttrium Barium Copper Oxide (YBCO) as the infrared sensing material. A two-layer surface micromachining technique in conjunction with a resonant cavity and a reflecting mirror are used for the sensor structure. The devices have demonstrated voltage responsivities of 7.9x103 V/W with a temperature coefficient of resistance of -2.5% K-1, and thermal conductivity of 2.95x10-6 W/K. The device performance was similar in air and vacuum, demonstrating vacuum integrity and a good device-level encapsulation.

  16. Evaluation of a Capacitance Scaling System

    Science.gov (United States)

    2007-01-01

    2009 at 11:32 from IEEE Xplore . Restrictions apply. Report Documentation Page Form ApprovedOMB No. 0704-0188 Public reporting burden for the...Downloaded on January 30, 2009 at 11:32 from IEEE Xplore . Restrictions apply. 2162 IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, VOL. 56, NO. 6...30, 2009 at 11:32 from IEEE Xplore . Restrictions apply. AVRAMOV-ZAMUROVIC et al.: EVALUATION OF A CAPACITANCE SCALING SYSTEM 2163 measured to vary by

  17. THERMAL DRIFT CHARACTERISTICS OF CAPACITIVE PRESSURE SENSORS

    OpenAIRE

    2016-01-01

    The capacitive pressure sensors based on silicon are characterized by their very high sensitivities and their low power consumption. Nevertheless, their thermal behavior remains more or less unpredictable because they can indicate very high thermal coefficients. The study of the thermal behavior of these sensors is essential to define the parameters that cause the output characteristics drift. In this study, we modeled the thermal behavior of this sensors, using Finite Element Analysis (FE...

  18. Fiber inline Michelson interferometer fabricated by one-step femtosecond laser micromachining for sensing applications

    Science.gov (United States)

    Yuan, Lei; Wu, Hongbin; Wang, Cong; Yu, Yingyu; Wang, Sumei; Xiao, Hai

    2013-12-01

    A fiber inline Michelson interferometer fiber optic sensor was presented for sensing applications, including high temperature performance and refractive index change. The sensor was fabricated using one-step femtosecond (fs) laser micromachining technique. A step structure at the tip of a single mode optical fiber was formed during the micromachining process. The device had a loss of 16 dB and an interference visibility exceeding 18 dB. The capability of this device for temperature sensing up to 1000 °C and refractive index sensing application in various concentrations of ethanol solution were all demonstrated.

  19. DESIGN, FABRICATION, TESTING AND MECHANICAL ANALYSIS OF BULK-MICROMACHINED FLOWMETERS

    Institute of Scientific and Technical Information of China (English)

    Wang Xiaobao; Qian Jin; Zhang Dacheng

    2004-01-01

    Micromachined piezoresistive flowmeters with four different types of sensing structures have been designed, fabricated and tested. Piezoresistors were defined at the end of the sensors through p-diffusion, and their values were about 3.5 kΩ. Wheatstone bridge was configured with the piezoresistors in order to measure the output response. The output voltage increases with increasing flow rate of air, obeying determined relationships. The testing results show that the sensors that are designed for measuring 10L/M in full operational range have desired sensitivities. The sensor chip is manufactured with bulk-micromachining technologies, requiring a set of seven masks.

  20. A new desalination technique using capacitive deionization

    Science.gov (United States)

    Rostamy, Mohammad Sajjad; Khashechi, Morteza; Pipelzadeh, Ehsan; desalination Team

    2016-11-01

    Capacitive deionization (CDI) is an emerging energy efficient, low pressure and low capital intensive desalination process where ions are separated by a pure electrostatic force imposed by a small bias potential as low as 1 V That funded by an external Renewable (Solar) power supply to materials with high specific surface area. The main objective of this configuration is to separate the cation and anions on oppositely charged electrodes. Various electrode materials have been developed in the past, which have suffered from instability and lack of performance. Preliminary experimental results using carbon black, graphite powder, graphene ∖graphite ∖PTFE (Active ∖Conductive ∖binder), show that the graphene reduced via urea method is a suitable method to develop CDI electrode materials with capacitance as high as 52.2 mg/g for free standing graphene electrode. The focus of these studies has been mainly on developing electrodes with high specific surface area, high capacitance, excellent electronic conductivity and fast charge discharge cycles for desalination. Although some progress has been made, production of efficient and stable carbon based electrode materials for large scale desalination has not been fully realized.

  1. Capacitive Structures for Gas and Biological Sensing

    KAUST Repository

    Sapsanis, Christos

    2015-04-01

    The semiconductor industry was benefited by the advances in technology in the last decades. This fact has an impact on the sensors field, where the simple transducer was evolved into smart miniaturized multi-functional microsystems. However, commercially available gas and biological sensors are mostly bulky, expensive, and power-hungry, which act as obstacles to mass use. The aim of this work is gas and biological sensing using capacitive structures. Capacitive sensors were selected due to its design simplicity, low fabrication cost, and no DC power consumption. In the first part, the dominant structure among interdigitated electrodes (IDEs), fractal curves (Peano and Hilbert) and Archimedean spiral was investigated from capacitance density perspective. The investigation consists of geometrical formula calculations, COMSOL Multiphysics simulations and cleanroom fabrication of the capacitors on a silicon substrate. Moreover, low-cost fabrication on flexible plastic PET substrate was conducted outside cleanroom with rapid prototyping using a maskless laser etching. The second part contains the humidity, Volatile Organic compounds (VOCs) and Ammonia sensing of polymers, Polyimide and Nafion, and metal-organic framework (MOF), Cu(bdc)2.xH2O using IDEs and tested in an automated gas setup for experiment control and data extraction. The last part includes the biological sensing of C - reactive protein (CRP) quantification, which is considered as a biomarker of being prone to cardiac diseases and Bovine serum albumin (BSA) protein quantification, which is used as a reference for quantifying unknown proteins.

  2. Multi-Channel Capacitive Sensor Arrays

    Directory of Open Access Journals (Sweden)

    Bingnan Wang

    2016-01-01

    Full Text Available In this paper, multi-channel capacitive sensor arrays based on microstrip band-stop filters are studied. The sensor arrays can be used to detect the proximity of objects at different positions and directions. Each capacitive sensing structure in the array is connected to an inductive element to form resonance at different frequencies. The resonances are designed to be isolated in the frequency spectrum, such that the change in one channel does not affect resonances at other channels. The inductive element associated with each capacitive sensor can be surface-mounted inductors, integrated microstrip inductors or metamaterial-inspired structures. We show that by using metamaterial split-ring structures coupled to a microstrip line, the quality factor of each resonance can be greatly improved compared to conventional surface-mounted or microstrip meander inductors. With such a microstrip-coupled split-ring design, more sensing elements can be integrated in the same frequency spectrum, and the sensitivity can be greatly improved.

  3. Evaluation of EHD films by electrical capacitance

    Science.gov (United States)

    Jablonka, Karolina; Glovnea, Romeo; Bongaerts, Jeroen

    2012-09-01

    The elastohydrodynamic (EHD) lubrication regime occurs in many machine elements where a combination of hydrodynamic effect, elastic deformation of the loaded surfaces and increase in the viscosity of the lubricant with pressure ensures the formation of a very thin, but continuous film of lubricant separating the contacting surfaces. Electrical methods to determine this film's thickness have preceded optical methods, which are widely used today. Although they generally give more qualitative thickness information, electrical methods have the main advantage that they can be applied to metallic contacts in machines, which makes them useful tools in the study of elastohydrodynamically lubricated contacts. This paper is part of a larger study on the application of electrical capacitance for the evaluation of film formation in EHD contacts. The main focus is on the quantitative measurements of film thickness using electrical capacitance. A new approach allowing the lubricant film thickness to be extracted from the measured capacitance is developed using a chromium-coated glass disc and subsequently applied to a steel-on-steel contact. The results show good agreement with optical measurements and theoretical models over a range of film thickness.

  4. Effect of Astaxanthin on Human Sperm Capacitation

    Directory of Open Access Journals (Sweden)

    Luciana Bordin

    2013-06-01

    Full Text Available In order to be able to fertilize oocytes, human sperm must undergo a series of morphological and structural alterations, known as capacitation. It has been shown that the production of endogenous sperm reactive oxygen species (ROS plays a key role in causing cells to undergo a massive acrosome reaction (AR. Astaxanthin (Asta, a photo-protective red pigment belonging to the carotenoid family, is recognized as having anti-oxidant, anti-cancer, anti-diabetic and anti-inflammatory properties and is present in many dietary supplements. This study evaluates the effect of Asta in a capacitating buffer which induces low ROS production and low percentages of acrosome-reacted cells (ARC. Sperm cells were incubated in the presence or absence of increasing concentrations of Asta or diamide (Diam and analyzed for their ROS production, Tyr-phosphorylation (Tyr-P pattern and percentages of ARC and non-viable cells (NVC. Results show that Asta ameliorated both sperm head Tyr-P and ARC values without affecting the ROS generation curve, whereas Diam succeeded in enhancing the Tyr-P level but only of the flagellum without increasing ARC values. It is suggested that Asta can be inserted in the membrane and therefore create capacitation-like membrane alteration which allow Tyr-P of the head. Once this has occurred, AR can take place and involves a higher numbers of cells.

  5. Ultrasonic actuators for nanometre positioning

    Science.gov (United States)

    Snitka

    2000-03-01

    This paper deals with ultrasonic motors based on bimodal plate vibrations and their application to nanometre resolution stepper positioning systems. The concept of a linear ultrasonic motor drive capable of nanometric steps, long-range travel and reversible controlled motion is presented. The motor concept developed is based on the superposition of a longitudinal and bending vibrations of a rectangular resonator. The ultrasonic motor model based on system identification via discrete observations and prediction has been developed for control applications. The control algorithm for ultrasonic motors has been developed and theoretical investigations have been made. The open loop positioning system with designed stepper ultrasonic drive produced 10 nm resolution and 5% displacement repeatability. The system with computer controlled position feedback has shown 0.3 micron positioning accuracy over the 100 mm positioning range.

  6. Ultrasonic dyeing of cellulose nanofibers.

    Science.gov (United States)

    Khatri, Muzamil; Ahmed, Farooq; Jatoi, Abdul Wahab; Mahar, Rasool Bux; Khatri, Zeeshan; Kim, Ick Soo

    2016-07-01

    Textile dyeing assisted by ultrasonic energy has attained a greater interest in recent years. We report ultrasonic dyeing of nanofibers for the very first time. We chose cellulose nanofibers and dyed with two reactive dyes, CI reactive black 5 and CI reactive red 195. The cellulose nanofibers were prepared by electrospinning of cellulose acetate (CA) followed by deacetylation. The FTIR results confirmed complete conversion of CA into cellulose nanofibers. Dyeing parameters optimized were dyeing temperature, dyeing time and dye concentrations for each class of the dye used. Results revealed that the ultrasonic dyeing produced higher color yield (K/S values) than the conventional dyeing. The color fastness test results depicted good dye fixation. SEM analysis evidenced that ultrasonic energy during dyeing do not affect surface morphology of nanofibers. The results conclude successful dyeing of cellulose nanofibers using ultrasonic energy with better color yield and color fastness results than conventional dyeing.

  7. Ultrasonic Force Microscopies

    Science.gov (United States)

    Kolosov, Oleg; Briggs, Andrew

    Ultrasonic Force Microscopy, or UFM, allows combination of two apparently mutually exclusive requirements for the nanomechanical probe—high stiffness for the efficient indentation and high mechanical compliance that brings force sensitivity. Somewhat inventively, UFM allows to combine these two virtues in the same cantilever by using indention of the sample at high frequency, when cantilever is very rigid, but detecting the result of this indention at much lower frequency. That is made possible due to the extreme nonlinearity of the nanoscale tip-surface junction force-distance dependence, that acts as "mechanical diode" detecting ultrasound in AFM. After introducing UFM principles, we discuss features of experimental UFM implementation, and the theory of contrast in this mode, progressing to quantitative measurements of contact stiffness. A variety of UFM applications ranging from semiconductor quantum nanostructures, graphene, very large scale integrated circuits, and reinforced ceramics to polymer composites and biological materials is presented via comprehensive imaging gallery accompanied by the guidance for the optimal UFM measurements of these materials. We also address effects of adhesion and topography on the elasticity imaging and the approaches for reducing artifacts connected with these effects. This is complemented by another extremely useful feature of UFM—ultrasound induced superlubricity that allows damage free imaging of materials ranging from stiff solid state devices and graphene to biological materials. Finally, we proceed to the exploration of time-resolved nanoscale phenomena using nonlinear mixing of multiple vibration frequencies in ultrasonic AFM—Heterodyne Force Microscopy, or HFM, that also include mixing of ultrasonic vibration with other periodic physical excitations, eg. electrical, photothermal, etc. Significant section of the chapter analyzes the ability of UFM and HFM to detect subsurface mechanical inhomogeneities, as well as

  8. High aspect ratio transmission line circuits micromachined in silicon

    Science.gov (United States)

    Todd, Shane Truman

    The performance of complimentary metal-oxide-semiconductor (CMOS) monolithic microwave integrated circuits (MMICs) fabricated on silicon has improved dramatically. The scaling down of silicon transistors has increased the maximum frequency of transistors to the point where silicon MMICs have become a viable alternative to compound semiconductor MMICs in certain applications. A fundamental problem still exists in silicon MMICs however in that transmission lines fabricated on silicon can suffer from high loss due to the finite conductivity of the silicon substrate. A novel approach for creating low-loss transmission lines on silicon is presented in this work. Low-loss transmission lines are created on low resistivity silicon by using a micromachining method that combines silicon deep reactive ion etching (DRIE), thermal oxidation, electroplating, and planarization. Two types of high aspect ratio transmission lines are created with this method including high aspect ratio coplanar waveguide (hicoplanar) and semi-rectangular coaxial (semicoaxial). Transmission lines with impedances ranging from 20--80 O have been fabricated with minimum measured loss lower than 1 dB/cm at 67 GHz. Low-loss dielectrics are created for the high aspect ratio transmission lines using the mesa merging method. The mesa merging method works by creating silicon mesa arrays using DRIE and then converting and merging the mesa arrays into a solid oxide dielectric using thermal oxidation. The transmission lines are designed so that the fields penetrate the low-loss oxide dielectric and are isolated from the lossy silicon substrate. The mesa merging method has successfully created large volume oxide with depth up to 65 microm and width up to 240 microm in short oxidation times. Other advantages of the high aspect ratio transmission lines are demonstrated including low-loss over a wide impedance range, high isolation, and high coupling for coupled-line circuits. Transmission line models have been

  9. Fabrication of Micro/Nano Structures on Metals by Femtosecond Laser Micromachining

    Directory of Open Access Journals (Sweden)

    K. M. Tanvir Ahmmed

    2014-11-01

    Full Text Available Femtosecond laser micromachining has emerged in recent years as a new technique for micro/nano structure fabrication because of its applicability to virtually all kinds of materials in an easy one-step process that is scalable. In the past, much research on femtosecond laser micromachining was carried out to understand the complex ablation mechanism, whereas recent works are mostly concerned with the fabrication of surface structures because of their numerous possible applications. The state-of-the-art knowledge on the fabrication of these structures on metals with direct femtosecond laser micromachining is reviewed in this article. The effect of various parameters, such as fluence, number of pulses, laser beam polarization, wavelength, incident angle, scan velocity, number of scans, and environment, on the formation of different structures is discussed in detail wherever possible. Furthermore, a guideline for surface structures optimization is provided. The authors’ experimental work on laser-inscribed regular pattern fabrication is presented to give a complete picture of micromachining processes. Finally, possible applications of laser-machined surface structures in different fields are briefly reviewed.

  10. Long-life micro vacuum chamber for a micromachined cryogenic cooler

    NARCIS (Netherlands)

    Cao, H.; Vermeer, C.H.; Vanapalli, S.; Holland, H.J.; Brake, ter H.J.M.

    2015-01-01

    Micromachined cryogenic coolers can be used for cooling small electronic devices to improve their performance. However, for reaching cryogenic temperatures, they require a very good thermal insulation from the warm environment. This is established by a vacuum space that for adequate insulation has t

  11. New technique for fabrication of high frequency piezoelectric Micromachined Ultrasound Transducers

    DEFF Research Database (Denmark)

    Pedersen, T; Thomsen, Erik Vilain; Zawada, T;

    2008-01-01

    A novel technique for fabrication of linear arrays of high frequency piezoelectric Micromachined Ultrasound Transducers (pMUT) on silicon substrates is presented. Piezoelectric elements are formed by deposition of PZT ((PbZrxTi1-x)O3) into etched features of the silicon substrate...

  12. Analysis of Drift Errors in the JPL/UCLA Micromachined Gyroscope

    Science.gov (United States)

    Chakraborty, I.

    1996-01-01

    The model of the JPL/UCLA micromachined vibratory gyroscope will be enhanced to include time varying effects. First, they will be shown to exist through trends in the experimental results. Causes of mechanical error will be further explained by analyzing possible perturbations to the physical model.

  13. Coupling of a CMOS Optical Sensor to a Micromachined Deformable Mirror with an Adaline Neural Method

    NARCIS (Netherlands)

    De Lima Monteiro, D.W.; Ferreira, A.I.; Teixeira, F.B.; Melo, J.G.M.; Vdovin, G.V.

    2006-01-01

    We report on the preliminary results of an Adaline neural method for the coupling of a custom CMOS wavefront sensor to a micromachined adaptive mirror. The algorithm does not rely on a fixed basis matrix -as opposed to traditional methods-, offers excellent immunity to round-off errors and admits re

  14. Optical micro-metrology of structured surfaces micro-machined by jet-ECM

    DEFF Research Database (Denmark)

    Quagliotti, Danilo; Tosello, Guido; Islam, Aminul

    2015-01-01

    A procedure for statistical analysis and uncertainty evaluation is presented with regards to measurements of step height and surface texture. Measurements have been performed with a focus-variation microscope over jet electrochemical micro-machined surfaces. Traceability has been achieved using...

  15. Optical micro-metrology of structured surfaces micro-machined by jet-ECM

    DEFF Research Database (Denmark)

    Quagliotti, Danilo; Tosello, Guido; Islam, Aminul

    A procedure for statistical analysis and uncertainty evaluation is presented with regards to measurements of step height and surface texture. Measurements have been performed with a focus-variation microscope over jet electrochemical micro-machined surfaces. Traceability has been achieved using...

  16. Deflection and maximum load of microfiltration membrane sieve made with silicon micromachining

    NARCIS (Netherlands)

    Rijn, van Cees; Wekken, van der Michiel; Nijdam, Wietze; Elwenspoek, Miko

    1997-01-01

    With the use of silicon micromachining, an inorganic membrane sieve for microfiltration has been constructed having a silicon nitride membrane layer with thickness typically 1 ¿m and perforations typically between 0.5 ¿m and 10 ¿m in diameter. As a support a ¿100¿-silicon wafer with openings of 1000

  17. Micro-machining workstation for a diode pumped Nd:YAG high-brightness laser system

    NARCIS (Netherlands)

    Kleijhorst, R.A.; Offerhaus, H.L.; Bant, P.

    1998-01-01

    A Nd:YAG micro-machining workstation that allows cutting on a scale of a few microns has been developed and operated. The system incorporates a telescope viewing system that allows control during the work and a software interface to translate AutoCad files. Some examples of the performance are given

  18. Micromachined vertical Hall magnetic field sensor in standard complementary metal oxide semiconductor technology

    Science.gov (United States)

    Paranjape, M.; Ristic, Lj.

    1992-06-01

    A novel 2D micromachined vertical Hall magnetic field sensor structure has been designed and fabricated using a commercially available 3 micron CMOS process. The device can detect two magnetic field components in the plane of the chip surface. The sensor exhibits a linear response and shows no cross-sensitivity between channels.

  19. Ultrasonic Evaluation and Imaging

    Energy Technology Data Exchange (ETDEWEB)

    Crawford, Susan L.; Anderson, Michael T.; Diaz, Aaron A.; Larche, Michael R.; Prowant, Matthew S.; Cinson, Anthony D.

    2015-10-01

    Ultrasonic evaluation of materials for material characterization and flaw detection is as simple as manually moving a single-element probe across a speci-men and looking at an oscilloscope display in real time or as complex as automatically (under computer control) scanning a phased-array probe across a specimen and collecting encoded data for immediate or off-line data analyses. The reliability of the results in the second technique is greatly increased because of a higher density of measurements per scanned area and measurements that can be more precisely related to the specimen geometry. This chapter will briefly discuss applications of the collection of spatially encoded data and focus primarily on the off-line analyses in the form of data imaging. Pacific Northwest National Laboratory (PNNL) has been involved with as-sessing and advancing the reliability of inservice inspections of nuclear power plant components for over 35 years. Modern ultrasonic imaging techniques such as the synthetic aperture focusing technique (SAFT), phased-array (PA) technolo-gy and sound field mapping have undergone considerable improvements to effec-tively assess and better understand material constraints.

  20. Tunable Lowpass Filter with RF MEMS Capacitance and Transmission Line

    Directory of Open Access Journals (Sweden)

    Shimul C. Saha

    2012-01-01

    Full Text Available We have presented an RF MEMS tuneable lowpass filter. Both distributed transmission lines and RF MEMS capacitances were used to replace the lumped elements. The use of RF MEMS capacitances gives the flexibility of tuning the cutoff frequency of the lowpass filter. We have designed a low-pass filter at 9–12 GHz cutoff frequency using the theory of stepped impedance transmission lines. A prototype of the filter has been fabricated using parallel plate capacitances. The variable shunt capacitances are formed by a combination of a number of parallel plate RF MEMS capacitances. The cutoff frequency is tuned from C to X band by actuating different combinations of parallel capacitive bridges. The measurement results agree well with the simulation result.

  1. Numerical analysis of capacitive pressure micro-sensors

    Institute of Scientific and Technical Information of China (English)

    WANG; Xiaomin; LI; Mingxuan; WANG; Chenghao

    2005-01-01

    Pseudo-spectral method is used to numerically model the diaphragm deflection of capacitive pressure micro-sensor under uniform load. The relationship between the capacitance of the micro-sensor and the load is then analyzed after the description of the computational principle. For normal mode micro-sensor, the tensile force on the diaphragm can be ignored and thereby the capacitance increases linearly with the load increase only when the load is so small that the resultant deflection is less than the diaphragm thickness. The linear relationship between the capacitance and the load turns to be nonlinear thereafter and the capacitance rises dramatically with the constant increase of the load. For touch mode micro-sensor, an algorithm to determine the touch radius of the diaphragm and substrate is presented and the curve of capacitance versus load is shown on the numerical results laying a theoretical foundation for micro-sensor design.

  2. CMOS MEMS capacitive absolute pressure sensor

    Science.gov (United States)

    Narducci, M.; Yu-Chia, L.; Fang, W.; Tsai, J.

    2013-05-01

    This paper presents the design, fabrication and characterization of a capacitive pressure sensor using a commercial 0.18 µm CMOS (complementary metal-oxide-semiconductor) process and postprocess. The pressure sensor is capacitive and the structure is formed by an Al top electrode enclosed in a suspended SiO2 membrane, which acts as a movable electrode against a bottom or stationary Al electrode fixed on the SiO2 substrate. Both the movable and fixed electrodes form a variable parallel plate capacitor, whose capacitance varies with the applied pressure on the surface. In order to release the membranes the CMOS layers need to be applied postprocess and this mainly consists of four steps: (1) deposition and patterning of PECVD (plasma-enhanced chemical vapor deposition) oxide to protect CMOS pads and to open the pressure sensor top surface, (2) etching of the sacrificial layer to release the suspended membrane, (3) deposition of PECVD oxide to seal the etching holes and creating vacuum inside the gap, and finally (4) etching of the passivation oxide to open the pads and allow electrical connections. This sensor design and fabrication is suitable to obey the design rules of a CMOS foundry and since it only uses low-temperature processes, it allows monolithic integration with other types of CMOS compatible sensors and IC (integrated circuit) interface on a single chip. Experimental results showed that the pressure sensor has a highly linear sensitivity of 0.14 fF kPa-1 in the pressure range of 0-300 kPa.

  3. Irradiation Testing of Ultrasonic Transducers

    Energy Technology Data Exchange (ETDEWEB)

    Daw, Joshua; Tittmann, Bernhard; Reinhardt, Brian; Kohse, Gordon E.; Ramuhalli, Pradeep; Montgomery, Robert O.; Chien, Hual-Te; Villard, Jean-Francois; Palmer, Joe; Rempe, Joy

    2014-07-30

    Ultrasonic technologies offer the potential for high accuracy and resolution in-pile measurement of a range of parameters, including geometry changes, temperature, crack initiation and growth, gas pressure and composition, and microstructural changes. Many Department of Energy-Office of Nuclear Energy (DOE-NE) programs are exploring the use of ultrasonic technologies to provide enhanced sensors for in-pile instrumentation during irradiation testing. For example, the ability of single, small diameter ultrasonic thermometers (UTs) to provide a temperature profile in candidate metallic and oxide fuel would provide much needed data for validating new fuel performance models. Other efforts include an ultrasonic technique to detect morphology changes (such as crack initiation and growth) and acoustic techniques to evaluate fission gas composition and pressure. These efforts are limited by the lack of existing knowledge of ultrasonic transducer material survivability under irradiation conditions. For this reason, the Pennsylvania State University (PSU) was awarded an Advanced Test Reactor National Scientific User Facility (ATR NSUF) project to evaluate promising magnetostrictive and piezoelectric transducer performance in the Massachusetts Institute of Technology Research Reactor (MITR) up to a fast fluence of at least 1021 n/cm2 (E> 0.1 MeV). The goal of this research is to characterize magnetostrictive and piezoelectric transducer survivability during irradiation, enabling the development of novel radiation tolerant ultrasonic sensors for use in Material and Test Reactors (MTRs). As such, this test will be an instrumented lead test and real-time transducer performance data will be collected along with temperature and neutron and gamma flux data. The current work bridges the gap between proven out-of-pile ultrasonic techniques and in-pile deployment of ultrasonic sensors by acquiring the data necessary to demonstrate the performance of ultrasonic transducers.

  4. Ultrasonic Transducer Irradiation Test Results

    Energy Technology Data Exchange (ETDEWEB)

    Daw, Joshua [Idaho National Lab. (INL), Idaho Falls, ID (United States); Palmer, Joe [Idaho National Lab. (INL), Idaho Falls, ID (United States); Ramuhalli, Pradeep [Pacific Northwest National Lab. (PNNL), Richland, WA (United States); Keller, Paul [Pacific Northwest National Lab. (PNNL), Richland, WA (United States); Montgomery, Robert [Pacific Northwest National Lab. (PNNL), Richland, WA (United States); Chien, Hual-Te [Argonne National Lab. (ANL), Argonne, IL (United States); Kohse, Gordon [MIT (Massachusetts Inst. of Technology), Cambridge, MA (United States); Tittmann, Bernhard [Pennsylvania State Univ., University Park, PA (United States); Reinhardt, Brian [Pennsylvania State Univ., University Park, PA (United States); Rempe, Joy [Rempe and Associates, Idaho Falls, ID (United States)

    2015-02-01

    Ultrasonic technologies offer the potential for high-accuracy and -resolution in-pile measurement of a range of parameters, including geometry changes, temperature, crack initiation and growth, gas pressure and composition, and microstructural changes. Many Department of Energy-Office of Nuclear Energy (DOE-NE) programs are exploring the use of ultrasonic technologies to provide enhanced sensors for in-pile instrumentation during irradiation testing. For example, the ability of small diameter ultrasonic thermometers (UTs) to provide a temperature profile in candidate metallic and oxide fuel would provide much needed data for validating new fuel performance models. Other ongoing efforts include an ultrasonic technique to detect morphology changes (such as crack initiation and growth) and acoustic techniques to evaluate fission gas composition and pressure. These efforts are limited by the lack of identified ultrasonic transducer materials capable of long term performance under irradiation test conditions. For this reason, the Pennsylvania State University (PSU) was awarded an ATR NSUF project to evaluate the performance of promising magnetostrictive and piezoelectric transducers in the Massachusetts Institute of Technology Research Reactor (MITR) up to a fast fluence of at least 1021 n/cm2. The goal of this research is to characterize and demonstrate magnetostrictive and piezoelectric transducer operation during irradiation, enabling the development of novel radiation-tolerant ultrasonic sensors for use in Material Testing Reactors (MTRs). As such, this test is an instrumented lead test and real-time transducer performance data is collected along with temperature and neutron and gamma flux data. The current work bridges the gap between proven out-of-pile ultrasonic techniques and in-pile deployment of ultrasonic sensors by acquiring the data necessary to demonstrate the performance of ultrasonic transducers. To date, one piezoelectric

  5. Capacitive tool standoff sensor for dismantlement tasks

    Energy Technology Data Exchange (ETDEWEB)

    Schmitt, D.J.; Weber, T.M. [Sandia National Labs., Albuquerque, NM (United States); Liu, J.C. [Univ. of Illinois, Urbana, IL (United States)

    1996-12-31

    A capacitive sensing technology has been applied to develop a Standoff Sensor System for control of robotically deployed tools utilized in Decontamination and Dismantlement (D and D) activities. The system combines four individual sensor elements to provide non-contact, multiple degree-of-freedom control of tools at distances up to five inches from a surface. The Standoff Sensor has been successfully integrated to a metal cutting router and a pyrometer, and utilized for real-time control of each of these tools. Experiments demonstrate that the system can locate stationary surfaces with a repeatability of 0.034 millimeters.

  6. Magnetic field tunable capacitive dielectric:ionic-liquid sandwich composites

    Science.gov (United States)

    Wu, Ye; Bhalla, Amar; Guo, Ruyan

    2016-03-01

    We examined the tunability of the capacitance for GaFeO3-ionic liquid-GaFeO3 composite material by external magnetic and electric field. Up to 1.6 folds of capacitance tunability could be achieved at 957 kHz with voltage 4 V and magnetic field 0.02 T applied. We show that the capacitance enhancement is due to the polarization coupling between dielectric layer and ionic liquid layer.

  7. Carrier Statistics and Quantum Capacitance Models of Graphene Nanoscroll

    Directory of Open Access Journals (Sweden)

    M. Khaledian

    2014-01-01

    schematic perfect scroll-like Archimedes spiral. The DOS model was derived at first, while it was later applied to compute the carrier concentration and quantum capacitance model. Furthermore, the carrier concentration and quantum capacitance were modeled for both degenerate and nondegenerate regimes, along with examining the effect of structural parameters and chirality number on the density of state and carrier concentration. Latterly, the temperature effect on the quantum capacitance was studied too.

  8. Fundamentals of ultrasonic phased arrays

    CERN Document Server

    Schmerr, Lester W

    2014-01-01

    This book describes in detail the physical and mathematical foundations of ultrasonic phased array measurements.?The book uses linear systems theory to develop a comprehensive model of the signals and images that can be formed with phased arrays. Engineers working in the field of ultrasonic nondestructive evaluation (NDE) will find in this approach a wealth of information on how to design, optimize and interpret ultrasonic inspections with phased arrays. The fundamentals and models described in the book will also be of significant interest to other fields, including the medical ultrasound and

  9. Pulsed ultrasonic stir welding method

    Science.gov (United States)

    Ding, R. Jeffrey (Inventor)

    2013-01-01

    A method of performing ultrasonic stir welding uses a welding head assembly to include a plate and a rod passing through the plate. The rod is rotatable about a longitudinal axis thereof. In the method, the rod is rotated about its longitudinal axis during a welding operation. During the welding operation, a series of on-off ultrasonic pulses are applied to the rod such that they propagate parallel to the rod's longitudinal axis. At least a pulse rate associated with the on-off ultrasonic pulses is controlled.

  10. Ultrasonic Assembly of Thermoplastic Parts

    Energy Technology Data Exchange (ETDEWEB)

    Schurman, W. R.

    1970-03-31

    Four ultrasonic methods were evaluated for assembly of experimental plastic parts for detonators: (1) welding, (2) crimping and staking, (3) insertion, and (4) reactivation of adhesives. For welding, staking and insertion, plastics with low elastic moduli, such as acrylics and polycarbonate, produced the best results. Thermosetting, hot-melt, and solution adhesives could all be activated ultrasonically to form good bonds on plastics and other materials. This evaluation indicated that thermoplastic detonator parts could be assembled ultrasonically in shorter times than by present production techniques with high bond strengths and high product acceptance rates.

  11. Circuit analysis and simulation of an ultrahigh-frequency capacitance sensor for scanning capacitance microscopy

    Science.gov (United States)

    Yang, Jing; Postula, A.; Bialkowski, M.

    2004-03-01

    Quantitative two-dimensional dopant profiling tools are urgently needed for nowadays semiconductor industry. Scanning Capacitance Microscopy (SCM) holds most promise to become such a tool. The key component of SCM is an ultra high frequency (UHF) capacitance sensor. The output of the sensor has been approximately regarded as dC/dV, the derivative of the capacitance between the SCM tip and the sample versus the applied bias voltage. The SCM dopant profiling involves extracting the dopant profile from the SCM signal using analytic or numerical simulation models of Metal-Oxide-Semiconductor physics. To achieve a quantitative SCM dopant profiling, the operational principle of the whole SCM measurement has to be well understood and correctly included in those models. Recently, experimental evidences show the SCM signal is dramatically affected by many SCM experimental factors, including the behavior of the UHF capacitance sensor. However, till now, very little research has been reported on the behavior of the sensor in SCM measurement of semiconductors. In this paper, we derive an analytic expression of the sensor output, a circuit simulation model of the sensor is established using Advanced Design System 2003, and the dependences of the sensor output on the SCM operational factors are simulated.

  12. A Active Micromachined Scalp Electrode Array for Eeg Signal Recording.

    Science.gov (United States)

    Alizadeh-Taheri, Babak

    This thesis describes the design, microfabrication, and testing of an active scalp EEG (electroencephalograph) electrode that has several distinct advantages over existing technologies. These advantages are: (1) no electrolyte used, (2) no skin preparation, (3) significantly reduced sensor size, and (4) compatibility with EEG monitoring systems. The active electrode array is an integrated system made of an array of capacitive sensors with local integrated circuitry housed in a package with batteries to power the circuitry. This level of integration was required to achieve the functional performance obtained by the electrode. The electrode consists of a silicon sensor substrate fabricated at UCD and a custom circuit substrate fabricated at Orbit Semiconductors, using a 2 μm analog CMOS technology. The circuitry was designed for low 1/f noise. One side of the sensor substrate holds four capacitive sensors with rm Si_3N _4 as the dielectric material. The opposite side holds aluminum pads for bonding to the circuit substrate. A via hole technology was developed to make electrical contact to both sides of the sensor substrate. The via holes are 200 μm square openings etched through the silicon by a reactive ion etching (RIE) process using an rm SF_6/O_2 gas mixture, oxidized, and then filled with sputtered aluminum for contacts through the substrate. The via holes have an aspect ratio of 2:1 (length of opening to depth of hole). Silicon RIE etch rates of up to 18 mu/hr were obtained under optimum conditions, using a 0.8 μm aluminum mask. The circuit and sensor substrates were bonded with silver adhesive, and wire bonding was used to make electrical contacts between the substrates. The two substrates were then integrated in a custom package for testing. The electrode was tested on an electrical test bench and on human subjects in four modalities of EEG activity, namely: (1) spontaneous EEG, (2) sensory event-related potentials, (3) brain stem potentials, and (4

  13. A capacitive biosensor based on an interdigitated electrode with nanoislands.

    Science.gov (United States)

    Jung, Ha-Wook; Chang, Young Wook; Lee, Ga-yeon; Cho, Sungbo; Kang, Min-Jung; Pyun, Jae-Chul

    2014-09-24

    A capacitive biosensor based on an interdigitated electrode (IDE) with nanoislands was developed for label-free detection of antigen-antibody interactions. To enable sensitive capacitive detection of protein adsorption, the nanoislands were fabricated between finger electrodes of the IDE. The effect of the nanoislands on the sensitive capacitive measurement was estimated using horseradish peroxidase (HRP) as a model protein. Additionally, a parylene-A film was coated on the IDE with nanoislands to improve the efficiency of protein immobilization. By using HRP and hepatitis B virus surface antigen (HBsAg) as model analytes, the effect of the parylene-A film on the capacitive detection of protein adsorption was demonstrated.

  14. Nanostructured conducting polymer based reagentless capacitive immunosensor.

    Science.gov (United States)

    Bandodkar, Amay Jairaj; Dhand, Chetna; Arya, Sunil K; Pandey, M K; Malhotra, Bansi D

    2010-02-01

    Nanostructured polyaniline (PANI) film electrophoretically fabricated onto indium-tin-oxide (ITO) coated glass plate has been utilized for development of an immunosensor based on capacitance change of a parallel plate capacitor (PPC) by covalently immobilizing anti-human IgG (Anti-HIgG) using N-ethyl-N'-(3-dimethylaminopropyl) carbodiimide and N-hydroxysuccinimide chemistry. These fabricated PANI/ITO and Anti-HIgG/PANI/ITO plates have been characterized using scanning electron microscopy, cyclic voltammetry, differential pulse voltammetry and Fourier transform infra-red studies. The capacitance measurements indicate that dielectric medium of this biologically modified PPC (Anti-HIgG/PANI/ITO) is sensitive to HIgG in 5 - 5 x 10(5) ng mL(-1) range and has lower detection limit of 1.87 ng mL(-1). The observed results reveal that this Anti-HIgG modified PPC can be used as a robust, easy-to-use, reagentless, sensitive and selective immunosensor for estimation of human IgG.

  15. THERMAL DRIFT CHARACTERISTICS OF CAPACITIVE PRESSURE SENSORS

    Directory of Open Access Journals (Sweden)

    ABDELAZIZ BEDDIAF

    2016-03-01

    Full Text Available The capacitive pressure sensors based on silicon are characterized by their very high sensitivities and their low power consumption. Nevertheless, their thermal behavior remains more or less unpredictable because they can indicate very high thermal coefficients. The study of the thermal behavior of these sensors is essential to define the parameters that cause the output characteristics drift. In this study, we modeled the thermal behavior of this sensors, using Finite Element Analysis (FEA made in COMSOL. The model solved by COMSOL environment takes into account the entire sensor and thermal effects due to the temperature considering the materials’ properties, the geometric shape and also the heat transfer mechanisms. By COMSOL we determine how the temperature affects the sensor during the manufacturing process. For that end, we calculated the thermal drift of capacitance at rest, the thermal coefficients and we compared them with experimental results to validate our model. Further, we studied the thermal drift of sensor characteristics both at rest and under constant and uniform pressure. Further, our study put emphasis on the geometric influence parameters on these characteristics to optimize the sensor performance. Finally, this study allows us to predict the sensor behavior against temperature and to minimize this effect by optimizing the geometrical parameters.

  16. A micromachined angular-acceleration sensor for geophysical applications

    Science.gov (United States)

    Liu, Huafeng; Pike, W. T.

    2016-10-01

    This paper presents an angular-acceleration sensor that works as either an angular accelerometer or a gravity gradiometer and is based on the micro electromechanical system (MEMS) technology. The changes in the angle of the sensor mass are sensed by a rotational capacitive array transducer that is formed by electrodes on both the stator and rotor dies of the flip-chip-bonded MEMS chip (21 mm × 12.5 mm × 1 mm). The prototype was characterized, demonstrating a fundamental frequency of 27 Hz, a quality factor of 230 in air, and a sensitivity of 6 mV/(rad/s2). The demonstrated noise floor was less than 0.003 rad/s2/ √{ Hz } within a bandwidth of 0.1 Hz to 10 Hz, which is comparable with the conventional angular accelerometer and is better than the other reported MEMS sensors in low-frequency ranges. The features of small size and low cost suggest that this MEMS angular-acceleration sensor could be mounted on a drone, a satellite or even a Mars rover, and it is promising to be used for monitoring angular accelerations, aiding seismic recording, mapping gravity anomalies, and other geophysical applications for large-scale terrestrial and space deployments.

  17. A practical ultrasonic plethysmograph

    Science.gov (United States)

    Wu, V. C.; Nickell, W. T.; Bhagat, P. K.

    1982-01-01

    An ultrasonic plethysmograph, which gives improved performance over the standard Whitney Strain Gauge, is described. This instrument monitors dimension changes in human limbs by measuring the transit times of acoustic pulses across two chords of the limb. In the case of a small uniform expansion, the percentage change in limb volume is shown to be proportional to twice the percentage change in either of the measured chords. Measurement of two chords allows correction for possible non-uniform expansion. In addition, measurement of two chords allows an estimate of the absolute cross-sectional area of the limb. The developed instrument incorporates a microprocessor, which performs necessary calculation and control functions. Use of the microprocessor allows the instrument to be self-calibrating. In addition, the device can be easily reprogrammed to incorporate improvements in operating features or computational schemes.

  18. Ultrasonic Atomization Amount for Different Frequencies

    Science.gov (United States)

    Yasuda, Keiji; Honma, Hiroyuki; Xu, Zheng; Asakura, Yoshiyuki; Koda, Shinobu

    2011-07-01

    The mass flow rate of ultrasonic atomization was estimated by measuring the vaporization amount from a bulk liquid with a fountain. The effects of ultrasonic frequency and intensity on the atomization characteristics were investigated when the directivities of the acoustic field from a transducer were almost the same. The sample was distillated water and the ultrasonic frequencies were 0.5, 1.0, and 2.4 MHz. The mass flow rate of ultrasonic atomization increased with increasing ultrasonic intensity and decreasing ultrasonic frequency. The fountain was formed at the liquid surface where the effective value of acoustic pressure was above atmospheric pressure. The fountain height was strongly governed by the acoustic pressure at the liquid surface of the transducer center. At the same ultrasonic intensity, the dependence of ultrasonic frequency on the number of atomized droplets was small. At the same apparent surface area of the fountain, the number of atomized droplets became larger as the ultrasonic frequency increased.

  19. Large Capacitance Measurement by Multiple Uses of MBL Charge Sensor

    Science.gov (United States)

    Lee, Jung Sook; Chae, Min; Kim, Jung Bog

    2010-01-01

    A recent article by Morse described interesting electrostatics experiments using an MBL charge sensor. In this application, the charge sensor has a large capacitance compared to the charged test object, so nearly all charges can be transferred to the sensor capacitor from the capacitor to be measured. However, the typical capacitance of commercial…

  20. Electric field theory and the fallacy of void capacitance

    DEFF Research Database (Denmark)

    McAllister, Iain Wilson

    1991-01-01

    The concept of the capacitance of a gaseous void is discussed as applied to electrical insulation science. The most pertinent aspect of the capacitance definition is that of reference to a single-valued potential difference between surfaces. This implies that these surfaces must be surfaces...

  1. Capacitance tuning of nanoscale split-ring resonators

    DEFF Research Database (Denmark)

    Jeppesen, Claus; Xiao, Sanshui; Mortensen, Niels Asger;

    2010-01-01

    In this paper, we investigate the capacitance tuning of nanoscale split-ring resonators. Based on a simple LC circuit model (LC-model), we derive an expression where the inductance is proportional to the area while the capacitance reflects the aspect ratio of the slit. The resonance frequency may...

  2. Capacitance tuning of nanoscale split-ring resonators

    DEFF Research Database (Denmark)

    Jeppesen, Claus; Mortensen, Asger; Kristensen, Anders

    2009-01-01

    We investigate the capacitance tuning of nanoscale split-ring resonators. Based on a simple inductor-capacitor circuit model, we derive an expression, where the inductance is proportional to the area while the capacitance reflects the aspect ratio of the slit. The resonance frequency may thus be ...

  3. Human body capacitance: static or dynamic concept? [ESD

    DEFF Research Database (Denmark)

    Jonassen, Niels M

    1998-01-01

    A standing human body insulated from ground by footwear and/or floor covering is in principle an insulated conductor and has, as such, a capacitance, i.e. the ability to store a charge and possibly discharge the stored energy in a spark discharge. In the human body, the human body capacitance (HBC...

  4. Distributed Capacitance of Coaxial Line With Perturbed Walls

    Institute of Scientific and Technical Information of China (English)

    2000-01-01

    Perturbation method of boundary geometry(PMOBG) used in Laplacian problems is dealt with and the three-term perturbation expression of distributed capacitance of a coaxial line with perturbed walls is obtained. As an example,four-order expression of distributed capacitance of a elliptic coaxial line with small eccentricity is given.

  5. Nanoscale capacitance: A quantum tight-binding model

    Science.gov (United States)

    Zhai, Feng; Wu, Jian; Li, Yang; Lu, Jun-Qiang

    2017-01-01

    Landauer-Buttiker formalism with the assumption of semi-infinite electrodes as reservoirs has been the standard approach in modeling steady electron transport through nanoscale devices. However, modeling dynamic electron transport properties, especially nanoscale capacitance, is a challenging problem because of dynamic contributions from electrodes, which is neglectable in modeling macroscopic capacitance and mesoscopic conductance. We implement a self-consistent quantum tight-binding model to calculate capacitance of a nano-gap system consisting of an electrode capacitance C‧ and an effective capacitance Cd of the middle device. From the calculations on a nano-gap made of carbon nanotube with a buckyball therein, we show that when the electrode length increases, the electrode capacitance C‧ moves up while the effective capacitance Cd converges to a value which is much smaller than the electrode capacitance C‧. Our results reveal the importance of electrodes in modeling nanoscale ac circuits, and indicate that the concepts of semi-infinite electrodes and reservoirs well-accepted in the steady electron transport theory may be not applicable in modeling dynamic transport properties.

  6. Nonlinear dynamics of capacitive charging and desalination by porous electrodes

    NARCIS (Netherlands)

    Biesheuvel, P.M.; Bazant, M.Z.

    2010-01-01

    The rapid and efficient exchange of ions between porous electrodes and aqueous solutions is important in many applications, such as electrical energy storage by supercapacitors, water desalination and purification by capacitive deionization, and capacitive extraction of renewable energy from a salin

  7. Characterizing Inductive and Capacitive Nonlinear RLC Circuits : A Passivity Test

    NARCIS (Netherlands)

    García-Canseco, Eloísa; Jeltsema, Dimitri; Ortega, Romeo; Scherpen, Jacquelien M.A.

    2004-01-01

    Linear time-invariant RLC circuits are said to be inductive (capacitive) if the current waveform in sinusoidal steady-state has a negative (resp., positive) phase shift with respect to the voltage. Furthermore, it is known that the circuit is inductive (capacitive) if and only if the magnetic energy

  8. Effect of estrogens on boar sperm capacitation in vitro

    Directory of Open Access Journals (Sweden)

    Ded Lukas

    2010-07-01

    Full Text Available Abstract Background Mammalian sperm must undergo a series of controlled molecular processes in the female reproductive tract called capacitation before they are capable of penetrating and fertilizing the egg. Capacitation, as a complex biological process, is influenced by many molecular factors, among which steroidal hormone estrogens play their role. Estrogens, present in a high concentration in the female reproductive tract are generally considered as primarily female hormones. However, there is increasing evidence of their important impact on male reproductive parameters. The purpose of this study is to investigate the effect of three natural estrogens such as estrone (E1, 17beta-estradiol (E2 and estriol (E3 as well as the synthetical one, 17alpha-ethynylestradiol (EE2 on boar sperm capacitation in vitro. Methods Boar sperm were capacitated in vitro in presence of estrogens. Capacitation progress in control and experimental samples was analyzed by flow cytometry with the anti-acrosin monoclonal antibody (ACR.2 at selected times of incubation. Sperm samples were analyzed at 120 min of capacitation by CTC (chlortetracycline assay, immunocytochemistry and flow cytometry with anti-acrosin ACR.2 antibody. Furthermore, sperm samples and capacitating media were analyzed by immunocytochemistry, ELISA with the ACR.2 antibody, and the acrosin activity assay after induced acrosomal reaction (AR. Results Estrogens stimulate sperm capacitation of boar sperm collected from different individuals. The stimulatory effect depends on capacitation time and is highly influenced by differences in the response to estrogens such as E2 by individual animals. Individual estrogens have relatively same effect on capacitation progress. In the boar samples with high estrogen responsiveness, estrogens stimulate the capacitation progress in a concentration-dependent manner. Furthermore, estrogens significantly increase the number of acrosome-reacted sperm after zona

  9. Capacitated dynamic lot sizing with capacity acquisition

    DEFF Research Database (Denmark)

    Li, Hongyan; Meissner, Joern

    2011-01-01

    batch, along with inventory carrying costs. The production per period is limited by a capacity restriction. The underlying capacity must be purchased up front for the upcoming season and remains constant over the entire season. We assume that the capacity acquisition cost is smooth and convex......One of the fundamental problems in operations management is determining the optimal investment in capacity. Capacity investment consumes resources and the decision, once made, is often irreversible. Moreover, the available capacity level affects the action space for production and inventory...... planning decisions directly. In this article, we address the joint capacitated lot-sizing and capacity-acquisition problems. The firm can produce goods in each of the finite periods into which the production season is partitioned. Fixed as well as variable production costs are incurred for each production...

  10. Capacitated Dynamic Lot Sizing with Capacity Acquisition

    DEFF Research Database (Denmark)

    Li, Hongyan; Meissner, Joern

    with inventory carrying costs. The production per period limited by a capacity restriction. The underlying capacity must be purchased up front for the upcoming season and remains constant over the entire season. We assume that the capacity acquisition cost is smooth and convex. For this situation, we develop......One of the fundamental problems in operations management is to determine the optimal investment in capacity. Capacity investment consumes resources and the decision is often irreversible. Moreover, the available capacity level affects the action space for production and inventory planning decisions...... directly. In this paper, we address the joint capacitated lot sizing and capacity acquisition problem. The firm can produce goods in each of the finite periods into which the production season is partitioned. Fixed as well as variable production costs are incurred for each production batch, along...

  11. Fund allocation using capacitated vehicle routing problem

    Science.gov (United States)

    Mamat, Nur Jumaadzan Zaleha; Jaaman, Saiful Hafizah; Ahmad, Rokiah Rozita; Darus, Maslina

    2014-09-01

    In investment fund allocation, it is unwise for an investor to distribute his fund into several assets simultaneously due to economic reasons. One solution is to allocate the fund into a particular asset at a time in a sequence that will either maximize returns or minimize risks depending on the investor's objective. The vehicle routing problem (VRP) provides an avenue to this issue. VRP answers the question on how to efficiently use the available fleet of vehicles to meet a given service demand, subjected to a set of operational requirements. This paper proposes an idea of using capacitated vehicle routing problem (CVRP) to optimize investment fund allocation by employing data of selected stocks in the FTSE Bursa Malaysia. Results suggest that CRVP can be applied to solve the issue of investment fund allocation and increase the investor's profit.

  12. Creatinine Diffusion Modeling in Capacitive Sensors

    Science.gov (United States)

    Mohabbati-Kalejahi, Elham; Azimirad, Vahid; Bahrami, Manouchehr

    2016-12-01

    In this paper, creatinine diffusion in capacitive sensors is discussed. The factors influencing the response time of creatinine biosensors are mathematically formulated and then three novel approaches for decreasing the response time are presented. At first, a piezoelectric actuator is used to vibrate the microtube that contains the blood sample, in order to reduce the viscosity of blood, and thus to increase the coefficient of diffusion. Then, the blood sample is assumed to be pushed through a porous medium, and the relevant conditions are investigated. Finally, the effect of the dentate shape of dielectric on response time is studied. The algorithms and the mathematical models are presented and discussed, and the results of simulations are illustrated. The response times for the first, second and third method are 60, 0.036 and about 31 s, respectively. It is also found that pumping results in very fast responses.

  13. [Wireless ECG measurement system with capacitive coupling].

    Science.gov (United States)

    Aleksandrowicz, Adrian; Walter, Marian; Leonhardt, Steffen

    2007-04-01

    This paper describes a measurement system that captures an electrocardiogram (ECG) using capacitively coupled electrodes. The measurement system was integrated into an off-the-shelf office chair (so-called "Aachen SmartChair"). Whereas for classical ECG measurement adhesive is used to attach conductively coupled electrodes to bare skin, the system presented allows ECG measurement through clothing without direct skin contact. Furthermore, a ZigBee communication module was integrated to allow wireless transmission of ECG data to a PC or an ICU patient monitor. For system validation, classical ECG using conductive electrodes was obtained simultaneously. First measurement results, including variations of cloth thickness and material, are presented and some of the system-specific problems of this approach are discussed.

  14. Nonlinear Dynamics of Capacitive Charging and Desalination by Porous Electrodes

    CERN Document Server

    Biesheuvel, P M

    2009-01-01

    The rapid and efficient exchange of ions between porous electrodes and aqueous solutions is important in many applications, such as electrical energy storage by super-capacitors, water desalination and purification by capacitive deionization (or desalination), and capacitive extraction of renewable energy from a salinity difference. Here, we present a unified mean-field theory for capacitive charging and desalination by ideally polarizable porous electrodes (without Faradaic reactions or specific adsorption of ions) in the limit of thin double layers (compared to typical pore dimensions). We illustrate the theory in the case of a dilute, symmetric, binary electrolyte using the Gouy-Chapman-Stern (GCS) model of the double layer, for which simple formulae are available for salt adsorption and capacitive charging of the diffuse part of the double layer. We solve the full GCS mean-field theory numerically for realistic parameters in capacitive deionization, and we derive reduced models for two limiting regimes wi...

  15. Study of CMOS integrated signal processing circuit in capacitive sensors

    Institute of Scientific and Technical Information of China (English)

    CAO Yi-jiang; YU Xiang; WANG Lei

    2007-01-01

    A CMOS integrated signal processing circuit based on capacitance resonance principle whose structure is simple in capacitive sensors is designed. The waveform of output voltage is improved by choosing bootstrap reference current mirror with initiate circuit, CMOS analogy switch and positive feedback of double-stage inverter in the circuit. Output voltage of this circuit is a symmetric square wave signal. The variation of sensitive capacitance, which is part of the capacitive sensors, can be denoted by the change of output voltage's frequency. The whole circuit is designed with 1.5 μm P-well CMOS process and simulated by PSpice software.Output frequency varies from 261.05 kHz to 47.93 kHz if capacitance varies in the range of 1PF~15PF. And the variation of frequency can be easily detected using counter or SCU.

  16. Study of High Capacitance Ratios CPW MEMS Shunt Switches

    Institute of Scientific and Technical Information of China (English)

    Jianhai Sun; Dafu Cui

    2006-01-01

    This paper describes a fixed-fixed beam ohmic switch in series with a fixed capacitor as a replacement for a capacitive switch. In this switch, a metal plate deposited on the dielectric ensures perfectly contact with the dielectric layer in the down state. The area size of the metal plate directly influences the capacitance ratio of the switch, as the area size of the metal cap decreases, the capacitance ratio dramatically rises up. The down/up capacitance ratio can exceed 800 times over the conventional designs using the same materials and the equal size. Measurement results show that high capacitance ratio of the switches has a large effect on the isolation, and can actually improve the performance of the switches.

  17. MOS Capacitance-Voltage Characteristics Ⅲ.Trapping Capacitance from 2-Charge-State Impurities

    Institute of Scientific and Technical Information of China (English)

    Jie Binbin; Sah Chihtang

    2011-01-01

    Low-frequency and high-frequency capacitance-voltage curves of Metal-Oxide-Semiconductor Capacitors are presented to illustrate giant electron and hole trapping capacitances at many simultaneously present two-charge-state and one-trapped-carrier,or one-energy-level impurity species.Models described include a donor electron trap and an acceptor hole trap,both donors,both acceptors,both shallow energy levels,both deep,one shallow and one deep,and the identical donor and acceptor.Device and material parameters are selected to simulate chemically and physically realizable capacitors for fundamental trapping parameter characterizations and for electrical and optical signal processing applications.

  18. Deep and vertical silicon bulk micromachining using metal assisted chemical etching

    Science.gov (United States)

    Zahedinejad, Mohammad; Delaram Farimani, Saeed; Khaje, Mahdi; Mehrara, Hamed; Erfanian, Alireza; Zeinali, Firooz

    2013-05-01

    In this paper, a newfound and simple silicon bulk micromachining process based on metal-assisted chemical etching (MaCE) is proposed which opens a whole new field of research in MEMS technology. This method is anisotropic and by controlling the etching parameters, deep vertical etching, relative to substrate surface, can be achieved in micrometer size for oriented Si wafer. By utilizing gold as a catalyst and a photoresist layer as the single mask layer for etching, 60 µm deep gyroscope micromachined structures have been fabricated for 2 µm features. The results indicate that MaCE could be the only wet etching method comparable to conventional dry etching recipes in terms of achievable etch rate, aspect ratio, verticality and side wall roughness. It also does not need a vacuum chamber and the other costly instruments associated with dry etching techniques.

  19. Towards fast femtosecond laser micromachining of fused silica: The effect of deposited energy.

    Science.gov (United States)

    Rajesh, Sheeba; Bellouard, Yves

    2010-09-27

    Femtosecond laser micromachining of glass material using low-energy, sub-ablation threshold pulses find numerous applications in the fields of integrated optics, lab-on-a-chips and microsystems in general. In this paper, we study the influence of the laser-deposited energy on the performance of the micromachining process. In particular, we show that the energy deposited in the substrate affects its etching rate. Furthermore, we demonstrate the existence of an optimal energy deposition value. These results are not only important from an industrial point-of-view but also provide new evidences supporting the essential role of densification and consequently stress-generation as the main driving factor promoting enhanced etching rate following laser exposure.

  20. Modelling of micromachining of human tooth enamel by erbium laser radiation

    Energy Technology Data Exchange (ETDEWEB)

    Belikov, A V; Skrypnik, A V; Shatilova, K V [St. Petersburg National Research University of Information Technologies, Mechanics and Optics, St. Petersburg (Russian Federation)

    2014-08-31

    We consider a 3D cellular model of human tooth enamel and a photomechanical cellular model of enamel ablation by erbium laser radiation, taking into account the structural peculiarities of enamel, energy distribution in the laser beam cross section and attenuation of laser energy in biological tissue. The surface area of the texture in enamel is calculated after its micromachining by erbium laser radiation. The influence of the surface area on the bond strength of enamel with dental filling materials is discussed. A good correlation between the computer simulation of the total work of adhesion and experimentally measured bond strength between the dental filling material and the tooth enamel after its micromachining by means of YAG : Er laser radiation is attained. (laser biophotonics)

  1. Design and Performance of a Focus-Detection System for Use in Laser Micromachining

    Directory of Open Access Journals (Sweden)

    Binh Xuan Cao

    2016-01-01

    Full Text Available We describe a new approach for locating the focal position in laser micromachining. This approach is based on a feedback system that uses a charge-coupled device (CCD camera, a beam splitter, and a mirror to focus a laser beam on the surface of a work piece. We tested the proposed method for locating the focal position by using Zemax simulations, as well as physically carrying out drilling processes. Compared with conventional methods, this approach is advantageous because: the implementation is simple, the specimen can easily be positioned at the focal position, and the dynamically adjustable scan amplitude and the CCD camera can be used to monitor the laser beam’s profile. The proposed technique will be particularly useful for locating the focal position on any surface in laser micromachining.

  2. Fabrication of three-dimensional microdisk resonators in calcium fluoride by femtosecond laser micromachining

    CERN Document Server

    Lin, Jintian; Tang, Jialei; Wang, Nengwen; Song, Jiangxin; He, Fei; Fang, Wei; Cheng, Ya

    2014-01-01

    We report on fabrication of on-chip calcium fluoride (CaF2) microdisk resonators using water-assisted femtosecond laser micromachining. Focused ion beam (FIB) milling is used to create ultra-smooth sidewalls. The quality (Q)-factors of the fabricated microresonators are measured to be 4.2x10^4 at wavelengths near 1550 nm. The Q factor is mainly limited by the scattering from the bottom surface of the disk whose roughness remains high due to the femtosecond laser micromachining process. This technique facilitates formation of on-chip microresonators on various kinds of bulk crystalline materials, which can benefit a wide range of applications such as nonlinear optics, quantum optics, and chip-level integration of photonic devices.

  3. Integrated Differential Three-Level High-Voltage Pulser Output Stage for CMUTs

    DEFF Research Database (Denmark)

    Llimos Muntal, Pere; Larsen, Dennis Øland; Jørgensen, Ivan Harald Holger;

    2015-01-01

    A new integrated differential three-level highvoltage pulser output stage to drive capacitive micromachined ultrasonic transducers (CMUTs) is proposed in this paper. A topology comparison between the new differential output stage and the most commonly used single-ended topology is performed...

  4. Acoustical cross-talk in row–column addressed 2-D transducer arrays for ultrasound imaging

    DEFF Research Database (Denmark)

    Christiansen, Thomas Lehrmann; Jensen, Jørgen Arendt; Thomsen, Erik Vilain

    2015-01-01

    The acoustical cross-talk in row–column addressed 2-D transducer arrays for volumetric ultrasound imaging is investigated. Experimental results from a 2.7 MHz, λ/2-pitch capacitive micromachined ultrasonic transducer (CMUT) array with 62 rows and 62 columns are presented and analyzed...

  5. 3-D Imaging Using Row-Column-Addressed Arrays With Integrated Apodization

    DEFF Research Database (Denmark)

    Christiansen, Thomas Lehrmann; Rasmussen, Morten Fischer; Bagge, Jan Peter;

    2015-01-01

    This paper demonstrates the fabrication, characterization, and experimental imaging results of a 62+62 element λ/2-pitch row-column-addressed capacitive micromachined ultrasonic transducer (CMUT) array with integrated apodization. A new fabrication process was used to manufacture a 26.3 mm by 26...

  6. Row-Column Addressed 2-D CMUT Arrays with Integrated Apodization

    DEFF Research Database (Denmark)

    Christiansen, Thomas Lehrmann; Rasmussen, Morten Fischer; Jensen, Jørgen Arendt;

    2014-01-01

    Experimental results from row-column addressed capacitive micromachined ultrasonic transducers (CMUTs) with integrated apodization are presented. The apodization is applied by varying the density of CMUT cells in the array with the objective of damping the edge waves originating from the element...

  7. Mutual Radiation Impedance of Uncollapsed CMUT Cells with Different Radii

    CERN Document Server

    Ozgurluk, Alper; Atalar, Abdullah; Koymen, Hayrettin

    2015-01-01

    A polynomial approximation is proposed for the mutual acoustic impedance between uncollapsed capacitive micromachined ultrasonic transducer (CMUT) cells with different radii in an infinite rigid baffle. The resulting approximation is employed in simulating CMUTs with a circuit model. A very good agreement is obtained with the corresponding finite element simulation (FEM) result.

  8. A Laser Fabrication of Magnetic Micromachines by Using Optimized Photosensitive Ferrofluids

    Directory of Open Access Journals (Sweden)

    Ye Tian

    2016-01-01

    Full Text Available We report here a laser fabrication of magnetic micromachines by using optimized photosensitive ferrofluids. Fe3O4 nanoparticles were prepared by thermal decomposition and subsequent ligand exchange. And then, they were dispersed into photoresist. As a representative illustration, a magnetic microturbine with high surface flatness was fabricated, and its rotation speed could reach as high as 400 rpm under revolving magnetic field.

  9. A resonant miniature electric field sensor using bulk-micromachining process

    Institute of Scientific and Technical Information of China (English)

    DENG Kai; XIA Shanhong; GONG Chao; PENG Chunrong; TAO Hu; BAI Qiang; CHEN Shaofeng

    2005-01-01

    A novel design of a resonant miniature electric field sensor based on microfabrication technology is proposed. The operating principles and specifications, the design structure, and the silicon-based bulk-micromachining fabrication process are presented. The finite element simulation shows that our design can obtain good results in device parameters setting, and its simplicity and low-cost features make it an attractive product for future applications.

  10. The effect of frequency on the lifetime of a surface micromachined microengine driving a load

    Energy Technology Data Exchange (ETDEWEB)

    Tanner, D.M.; Miller, W.M.; Eaton, W.P.; Irwin, L.W.; Peterson, K.A.; Dugger, M.T.; Senft, D.C.; Smith, N.F.; Tangyunyong, P.; Miller, S.L.

    1998-03-01

    Experiments have been performed on surface micromachined microengines driving load gears to determine the effect of the rotation frequency on median cycles to failure. The authors did observe a frequency dependence and have developed a model based on fundamental wear mechanisms and forces exhibited in resonant mechanical systems. Stressing loaded microengines caused observable wear in the rotating joints and in a few instances led to fracture of the pin joint in the drive gear.

  11. Feedback Control of Vibrations in a Micromachined Cantilever Beam with Electrostatic Actuators

    Science.gov (United States)

    Wang, P. K. C.

    1998-06-01

    The problem of feedback control of vibrations in a micromachined cantilever beam with nonlinear electrostatic actuators is considered. Various forms of nonlinear feedback controls depending on localized spatial averages of the beam velocity and displacement near the beam tip are derived by considering the time rate-of-change of the total energy of the beam. The physical implementation of the derived feedback controls is discussed briefly. The dynamic behaviour of the beam with the derived feedback controls is determined by computer simulation.

  12. 21 CFR 872.4850 - Ultrasonic scaler.

    Science.gov (United States)

    2010-04-01

    ... DEVICES DENTAL DEVICES Surgical Devices § 872.4850 Ultrasonic scaler. (a) Identification. An ultrasonic scaler is a device intended for use during dental cleaning and periodontal (gum) therapy to...

  13. Ultrasonic measurements and technologies

    CERN Document Server

    Kočiš, Štefan

    1996-01-01

    An impulse for writing this book has originated from the effort to sum­ marize and publicise the acquired results of a research team at the De­ partment of Automation of the Faculty of Electrical Engineering and In­ formatics, Slovak Technical University in Bratislava. The research team has been involved for a long time with control problems for machine production mechanisms and, in recent (approximately 15) years, its effort was aimed mostly at the control of electrical servosystems of robots. Within this scope, the members of the authors' staff solved the State Re­ search Task Ultrasonic sensing of the position of a robot hand, which was coordinated by the Institute of Technical Cybernetics of the Slovak Academy of Sciences in Bratislava. The problem was solved in a complex way, i.e. from a conceptual de­ sign of the measurement, through the measurement and evaluation sys­ tem, up to connection to the control system of a robot. Compensation of the atmospheric influence on the precision of measurement,...

  14. Friction Reduction of Chrome-Coated Surface with Micro-Dimple Arrays Generated by Electrochemical Micromachining

    Science.gov (United States)

    Chen, Xiaolei; Qu, Ningsong; Hou, Zhibao; Wang, Xiaolei; Zhu, Di

    2017-02-01

    Surface coating and surface texture play a significant role in enhancing the tribological properties of mechanical components. In this study, to further improve the tribological properties of a chrome-coated surface, arrays of circular- and square-shaped micro-dimples were generated on chrome-coated surfaces via electrochemical machining. Through-mask electrochemical micromachining (TMEMM) is a popular electrochemical micromachining method for generating micro-dimple arrays. However, photolithography is a necessary process in conventional TMEMM before electrochemical micromachining, which is time-consuming and expensive when used in mass production. A reusable polydimethylsiloxane mask was introduced to prepare the micro-dimples. Circular micro-dimples of 120 μm diameter and square micro-dimples of 106 μm side length were fabricated on a chrome-coated surface. The results of friction tests indicated that at a load of 220 N, 10 μm deep micro-dimples reduced the coefficient of friction (CoF) significantly compared to an untextured surface. At a load of 320 and 420 N, the CoF continually decreased when the depth of the micro-dimples was increased from 0 to 20 μm. In addition, the results showed that, compared to circular micro-dimples, square micro-dimples contributed to a higher friction reduction ratio under the same conditions. The best friction reduction ratio was found for square dimples with a depth of 20 μm.

  15. Measurement of Phase Difference for Micromachined Gyros Driven by Rotating Aircraft

    Directory of Open Access Journals (Sweden)

    Wei Zhang

    2013-08-01

    Full Text Available This paper presents an approach for realizing a phase difference measurement of a new gyro. A silicon micromachined gyro was mounted on rotating aircraft for aircraft attitude control. Aircraft spin drives the silicon pendulum of a gyro rotating at a high speed so that it can sense the transverse angular velocity of the rotating aircraft based on the gyroscopic precession principle when the aircraft has transverse rotation. In applications of the rotating aircraft single channel control system, such as damping in the attitude stabilization loop, the gyro signal must be kept in sync with the control signal. Therefore, the phase difference between both signals needs to be measured accurately. Considering that phase difference is mainly produced by both the micromachined part and the signal conditioning circuit, a mathematical model has been established and analyzed to determine the gyro’s phase frequency characteristics. On the basis of theoretical analysis, a dynamic simulation has been done for a case where the spin frequency is 15 Hz. Experimental results with the proposed measurement method applied to a silicon micromachined gyro driven by a rotating aircraft demonstrate that it is effective in practical applications. Measured curve and numerical analysis of phase frequency characteristic are in accordance, and the error between measurement and simulation is only 5.3%.

  16. Enhancing structural integrity of adhesive bonds through pulsed laser surface micro-machining

    KAUST Repository

    Diaz, Edwin Hernandez

    2015-06-01

    Enhancing the effective peel resistance of plastically deforming adhesive joints through laser-based surface micro-machining Edwin Hernandez Diaz Inspired by adhesion examples commonly found in nature, we reached out to examine the effect of different kinds of heterogeneous surface properties that may replicate this behavior and the mechanisms at work. In order to do this, we used pulsed laser ablation on copper substrates (CuZn40) aiming to increase adhesion for bonding. A Yb-fiber laser was used for surface preparation of the substrates, which were probed with a Scanning Electron Microscope (SEM) and X-ray Photoelectron Spectroscopy (XPS). Heterogeneous surface properties were devised through the use of simplified laser micromachined patterns which may induce sequential events of crack arrest propagation, thereby having a leveraging effect on dissipation. The me- chanical performance of copper/epoxy joints with homogeneous and heterogeneous laser micromachined interfaces was then analyzed using the T-peel test. Fractured surfaces were analyzed using SEM to resolve the mechanism of failure and adhesive penetration within induced surface asperities from the treatment. Results confirm positive modifications of the surface morphology and chemistry from laser ablation that enable mechanical interlocking and cohesive failure within the adhesive layer. Remarkable improvements of apparent peel energy, bond toughness, and effective peel force were appreciated with respect to sanded substrates as control samples.

  17. Monolithic geared-mechanisms driven by a polysilicon surface-micromachined on-chip electrostatic microengine

    Energy Technology Data Exchange (ETDEWEB)

    Sniegowski, J.J.; Miller, S.L.; LaVigne, G.F.; Rodgers, M.S.; McWhorter, P.J.

    1996-05-01

    We have previously described a practical micromachined power source: the polysilicon, surface-micromachined, electrostatically actuated microengine. Here we report on 3 aspects of implementing the microengine. First, we discuss demonstrations of the first-generation microengine actuating geared micromechanisms including gear trains with elements having dimensions comparable to the drive gear (about 50 {mu}m) and a relatively large (1600-{mu}m-diameter) rotating optical shutter element. These configurations span expected operating extremes for the microengine and address the coupling and loading issues for very-low-aspect-ratio micromechanisms which are common to the design of surface-micromachined devices. Second, we report on a second-generation of designs that utilize improved gear teeth design, a gear speed-reduction unit, and higher force-per-unit-area electrostatic comb drives. The speed-reduction unit produces an overall angular speed reduction of 9.63 and requires dual-level compound gears. Third, we discuss a dynamics model developed to accomplish 3 objectives: drive inertial loads in a controlled fashion, minimize stress and frictional forces during operation, and determine as a function of time the forces associated with the drive gear (eg load torque on drive gear from friction).

  18. Fiber laser micromachining of magnesium alloy tubes for biocompatible and biodegradable cardiovascular stents

    Science.gov (United States)

    Demir, Ali Gökhan; Previtali, Barbara; Colombo, Daniele; Ge, Qiang; Vedani, Maurizio; Petrini, Lorenza; Wu, Wei; Biffi, Carlo Alberto

    2012-02-01

    Magnesium alloys constitute an attractive solution for cardiovascular stent applications due to their intrinsic properties of biocompatibility and relatively low corrosion resistance in human-body fluids, which results in as a less intrusive treatment. Laser micromachining is the conventional process used to cut the stent mesh, which plays the key role for the accurate reproduction of the mesh design and the surface quality of the produced stent that are important factors in ensuring the mechanical and corrosion resistance properties of such a kind of devices. Traditionally continuous or pulsed laser systems working in microsecond pulse regime are employed for stent manufacturing. Pulsed fiber lasers on the other hand, are a relatively new solution which could balance productivity and quality aspects with shorter ns pulse durations and pulse energies in the order of mJ. This work reports the study of laser micromachining and of AZ31 magnesium alloy for the manufacturing of cardiovascular stents with a novel mesh design. A pulsed active fiber laser system operating in nanosecond pulse regime was employed for the micromachining. Laser parameters were studied for tubular cutting on a common stent material, AISI 316L tubes with 2 mm in diameter and 0.2 mm in thickness and on AZ31 tubes with 2.5 mm in diameter and 0.2 in thickness. In both cases process parameters conditions were examined for reactive and inert gas cutting solutions and the final stent quality is compared.

  19. A wafer mapping technique for residual stress in surface micromachined films

    Science.gov (United States)

    Schiavone, G.; Murray, J.; Smith, S.; Desmulliez, M. P. Y.; Mount, A. R.; Walton, A. J.

    2016-09-01

    The design of MEMS devices employing movable structures is crucially dependant on the mechanical behaviour of the deposited materials. It is therefore important to be able to fully characterize the micromachined films and predict with confidence the mechanical properties of patterned structures. This paper presents a characterization technique that enables the residual stress in MEMS films to be mapped at the wafer level by using microstructures released by surface micromachining. These dedicated MEMS test structures and the associated measurement techniques are used to extract localized information on the strain and Young’s modulus of the film under investigation. The residual stress is then determined by numerically coupling this data with a finite element analysis of the structure. This paper illustrates the measurement routine and demonstrates it with a case study using electrochemically deposited alloys of nickel and iron, particularly prone to develop high levels of residual stress. The results show that the technique enables wafer mapping of film non-uniformities and identifies wafer-to-wafer differences. A comparison between the results obtained from the mapping technique and conventional wafer bow measurements highlights the benefits of using a procedure tailored to films that are non-uniform, patterned and surface-micromachined, as opposed to simple standard stress extraction methods. The presented technique reveals detailed information that is generally unexplored when using conventional stress extraction methods such as wafer bow measurements.

  20. Modeling and Experimental Study on Characterization of Micromachined Thermal Gas Inertial Sensors

    Directory of Open Access Journals (Sweden)

    Yan Su

    2010-09-01

    Full Text Available Micromachined thermal gas inertial sensors based on heat convection are novel devices that compared with conventional micromachined inertial sensors offer the advantages of simple structures, easy fabrication, high shock resistance and good reliability by virtue of using a gaseous medium instead of a mechanical proof mass as key moving and sensing elements. This paper presents an analytical modeling for a micromachined thermal gas gyroscope integrated with signal conditioning. A simplified spring-damping model is utilized to characterize the behavior of the sensor. The model relies on the use of the fluid mechanics and heat transfer fundamentals and is validated using experimental data obtained from a test-device and simulation. Furthermore, the nonideal issues of the sensor are addressed from both the theoretical and experimental points of view. The nonlinear behavior demonstrated in experimental measurements is analyzed based on the model. It is concluded that the sources of nonlinearity are mainly attributable to the variable stiffness of the sensor system and the structural asymmetry due to nonideal fabrication.

  1. Characterization of electrical and mechanical activities of rabbit uterus associated with the presence of capacitated and non-capacitated spermatozoa

    Directory of Open Access Journals (Sweden)

    J.F. Lazcano-Reyes

    2013-12-01

    Full Text Available To investigate the effects capacitated spermatozoa may exert upon motility of the rabbit uterus, both contractility and electrical activity (frequency and intensity were measured in 3 distinctive uterine segments of anaesthetized does: horn (UH, uterotubal junction (UTJ and tube (UT after 1 natural mating, 2 infusion of either seminal plasma or PBS, 3 infusion of either capacitated or non-capacitated spermatozoa. Basal values were: 17.1, 15.7, 16.4 g (contractility, P>0.05; 3.5, 3.5, 3.4 Hz (frequency, P>0.05; 0.49, 0.50, 0.57 μV (intensity, P>0.05 for UH, UTJ, UT, respectively. Seminal plasma caused an increase (P<0.05 in the UH contractility: 26.3 vs. 11.7 (natural mating and 17.0 g (PBS; it also caused a decrease (P<0.05 in electrical intensity at the UTJ: 0.24 vs. 0.67 (natural mating and 0.58 μV (PBS. The presence of either capacitated or non-capacitated spermatozoa caused no changes in contractility and electrical frequency in any of the uterine segments. However, there was a change in electrical intensity at UTJ (0.37 vs. 0.57 μV for non-capacitated and capacitated spermatozoa, respectively; P<0.05. There were also differences between segments by treatment: UTJ (0.37 vs. UT (0.59 μV for non-capacitated; UH (0.46 vs. UT (0.71 μV for capacitated spermatozoa (P<0.05. In conclusion, use of this experimental model showed that uterine electrical activity was slightly modified by the presence of capacitated spermatozoa.

  2. Application and development of ultrasonics in dentistry.

    Science.gov (United States)

    Chen, Yen-Liang; Chang, Hao-Hueng; Chiang, Yu-Chih; Lin, Chun-Pin

    2013-11-01

    Since the 1950s, dentistry's ultrasonic instruments have developed rapidly. Because of better visualization, operative convenience, and precise cutting ability, ultrasonic instruments are widely and efficiently applied in the dental field. This article describes the development and improvement of ultrasonic instruments in several dental fields. Although some issues still need clarification, the results of previous studies indicate that ultrasonic instruments have a high potential to become convenient and efficient dental tools and deserve further development.

  3. Ultrasonic stir welding process and apparatus

    Science.gov (United States)

    Ding, R. Jeffrey (Inventor)

    2009-01-01

    An ultrasonic stir welding device provides a method and apparatus for elevating the temperature of a work piece utilizing at least one ultrasonic heater. Instead of relying on a rotating shoulder to provide heat to a workpiece an ultrasonic heater is utilized to provide ultrasonic energy to the workpiece. A rotating pin driven by a motor assembly performs the weld on the workpiece. A handheld version can be constructed as well as a fixedly mounted embodiment.

  4. Bloch inductance in small-capacitance Josephson junctions.

    Science.gov (United States)

    Zorin, A B

    2006-04-28

    We show that the electrical impedance of a small-capacitance Josephson junction also includes, in addition to the capacitive term -i/(omega)CB, an inductive term i(omega)LB. Similar to the known Bloch capacitance CB(q), the Bloch inductance LB(q) also depends periodically on the quasicharge, q, and its maximum value achieved at q=e(mod 2e) always exceeds the value of the Josephson inductance of this junction LJ(phi) at fixed phi=0. The effect of the Bloch inductance on the dynamics of a single junction and a one-dimensional array is described.

  5. Ultrasonics: Fundamentals, Technologies, and Applications

    Energy Technology Data Exchange (ETDEWEB)

    Ensminger, Dale; Bond, Leonard J.

    2011-09-17

    This is a new edition of a bestselling industry reference. Discusses the science, technology, and applications of low and high power ultrasonics, including industrial implementations and medical uses. Reviews the basic equations of acoustics, starting from basic wave equations and their applications. New material on property determination, inspection of metals (NDT) and non-metals, imaging, process monitoring and control. Expanded discussion of transducers, transducer wave-fields, scattering, attenuation and measurement systems and models. New material that discusses high power ultrasonics - in particular using mechanical effects and sonochemistry, including applications to nano-materials. Examines diagnosis, therapy, and surgery from a technology and medical physics perspective.

  6. Instabilities in a capacitively coupled oxygen plasma

    Energy Technology Data Exchange (ETDEWEB)

    Küllig, C., E-mail: kuellig@physik.uni-greifswald.de; Wegner, Th., E-mail: physics@thwegner.com; Meichsner, J., E-mail: meichsner@physik.uni-greifswald.de [Institute of Physics, University of Greifswald, Felix-Hausdorff-Str. 6, 17489 Greifswald (Germany)

    2015-04-15

    Periodic fluctuations in the frequency range from 0.3 to 3 kHz were experimentally investigated in capacitively coupled radio frequency (13.56 MHz) oxygen plasma. The Gaussian beam microwave interferometry directly provides the line integrated electron density fluctuations. A system of two Langmuir probes measured the floating potential spatially (axial, radial) and temporally resolved. Hence, the floating potential fluctuation development is mapped within the discharge volume and provides a kind of discharge breathing and no wave propagation. Finally, it was measured the optical emission pattern of atomic oxygen during the fluctuation as well as the RF phase resolved optical emission intensity at selected phase position of the fluctuation by an intensified charge-coupled device camera. The deduced excitation rate pattern reveals the RF sheath dynamics and electron heating mechanisms, which is changing between low and high electronegativity during a fluctuation cycle. A perturbation calculation was taken into account using a global model with 15 elementary collision processes in the balance equations for the charged plasma species (O{sub 2}{sup +}, e, O{sup −}, O{sub 2}{sup −}) and a harmonic perturbation. The calculated frequencies agree with the experimentally observed frequencies. Whereby, the electron attachment/detachment processes are important for the generation of this instability.

  7. Design Considerations in Capacitively Coupled Plasmas

    Science.gov (United States)

    Song, Sang-Heon; Ventzek, Peter; Ranjan, Alok

    2015-11-01

    Microelectronics industry has driven transistor feature size scaling from 10-6 m to 10-9 m during the past 50 years, which is often referred to as Moore's law. It cannot be overstated that today's information technology would not have been so successful without plasma material processing. One of the major plasma sources for the microelectronics fabrication is capacitively coupled plasmas (CCPs). The CCP reactor has been intensively studied and developed for the deposition and etching of different films on the silicon wafer. As the feature size gets to around 10 nm, the requirement for the process uniformity is less than 1-2 nm across the wafer (300 mm). In order to achieve the desired uniformity, the hardware design should be as precise as possible before the fine tuning of process condition is applied to make it even better. In doing this procedure, the computer simulation can save a significant amount of resources such as time and money which are critical in the semiconductor business. In this presentation, we compare plasma properties using a 2-dimensional plasma hydrodynamics model for different kinds of design factors that can affect the plasma uniformity. The parameters studied in this presentation include chamber accessing port, pumping port, focus ring around wafer substrate, and the geometry of electrodes of CCP.

  8. Locating Depots for Capacitated Vehicle Routing

    CERN Document Server

    Goertz, Inge Li

    2011-01-01

    We study a location-routing problem in the context of capacitated vehicle routing. The input is a set of demand locations in a metric space and a fleet of k vehicles each of capacity Q. The objective is to locate k depots, one for each vehicle, and compute routes for the vehicles so that all demands are satisfied and the total cost is minimized. Our main result is a constant-factor approximation algorithm for this problem. To achieve this result, we reduce to the k-median-forest problem, which generalizes both k-median and minimum spanning tree, and which might be of independent interest. We give a (3+c)-approximation algorithm for k-median-forest, which leads to a (12+c)-approximation algorithm for the above location-routing problem, for any constant c>0. The algorithm for k-median-forest is just t-swap local search, and we prove that it has locality gap 3+2/t; this generalizes the corresponding result known for k-median. Finally we consider the "non-uniform" k-median-forest problem which has different cost ...

  9. An uncooled capacitive sensor for IR detection

    Science.gov (United States)

    Siebke, Georg; Gerngroß, Kathrin; Holik, Peter; Schmitz, Sam; Rohloff, Markus; Tätzner, Simon; Steltenkamp, Siegfried

    2014-06-01

    The beetle Melanophila acuminata detects forest fires from distances as far as 80 miles away. To accomplish this, the beetle uses highly specific IR receptors with a diameter of approximately 15 μm. These receptors are mechanoreceptors that detect deformations induced by the absorption of radiation. Although the detection mechanism is understood in principle, it is still unclear how the beetle reaches such high sensitivity. In this work, we present the biomimetic approach of an uncooled IR sensor based on the beetle's receptors. This sensor is based on a fluid-filled pressure cell and operates at room temperature. Upon absorbing IR radiation, the fluid heats up and expands. The expanding fluid deflects one electrode of a plate capacitor. By measuring the change in capacitance, the volume increase and the absorbed energy can be inferred. To prevent the risk of damage at high energy absorption, a compensation mechanism is presented in this work. The mechanism prevents large but slow volume changes inside the pressure cell by a microfluidic connection of the pressure cell with a compensation chamber. The channel and the compensation chamber act as a microfluidic low-pass filter and do not affect the overall sensitivity above an appropriate cut-off frequency. Using MEMS technology, we are able to incorporate the complete system into a silicon chip with an area of a few mm2. Here, we show a proof-of-concept and first measurements of the sensor.

  10. 石英微机械陀螺的研究进展%Reaearch Development of Quartz Micromachined Gyroscopes

    Institute of Scientific and Technical Information of China (English)

    关冉; 张卫平; 陈文元; 张弓; 成宇翔

    2012-01-01

    首先介绍了石英微机械陀螺基于压电效应和科氏加速度的工作原理,回顾了石英微机械陀螺的发展历程,并且介绍了石英微机械陀螺的国内外发展现状.然后,针对石英微机械陀螺不同的结构进行了分类,并且对于不同结构的石英微机械陀螺的具体加工工艺、性能参数、应用领域等进行了综述.最后,对不同结构类型的石英微机械陀螺的尺寸、加工工艺,检测轴向,精度等参数进行了总结和对比,在此基础上分析了石英微机械陀螺的发展趋势,并指出了石英微机械陀螺研究中存在的问题,例如石英加工过程中产生的侧壁晶棱的不平整、石英侧壁电极的制作困难以及石英微机械陀螺多轴化应用的限制等.%Firstly, the working principle of the quartz micromachined gyroscope is introduced, which is based on the piezoelectric effect and the Coriolis acceleration, the development history of the quartz micromachined gyroscope is reviewed, and the development present situation of the quartz micromachined gyroscope is introduced both domestically and abroad. Then, the quartz micromachined gyroscope is classified into several types according to its different structures, and the specific fabrication process, performance parameter and application fields of the quartz micromachined gyroscope for the different structures are reviewed. Finally, the parameters of the quartz micromachined gyroscope for the different kinds of structures are summarized and compared, including the size, fabrication process, detection axis and accuracy, and on that basis, the development trends of the quartz micromachined gyroscope are analyzed, and the problems that limit the development of quartz micromachined gyroscope are pointed out, including the uneven crystal edges of the quartz sidewall caused by the fabrication process, the difficulties of electrode fabrication on the quartz sidewall and the limitation of the multi

  11. Oil-water two-phase flow measurement with combined ultrasonic transducer and electrical sensors

    Science.gov (United States)

    Tan, Chao; Yuan, Ye; Dong, Xiaoxiao; Dong, Feng

    2016-12-01

    A combination of ultrasonic transducers operated in continuous mode and a conductance/capacitance sensor (UTCC) is proposed to estimate the individual flow velocities in oil-water two-phase flows. Based on the Doppler effect, the transducers measure the flow velocity and the conductance/capacitance sensor estimates the phase fraction. A set of theoretical correlations based on the boundary layer models of the oil-water two-phase flow was proposed to describe the velocity profile. The models were separately established for the dispersion flow and the separate flow. The superficial flow velocity of each phase is calculated with the velocity measured in the sampling volume of the ultrasonic transducer with the phase fraction through the velocity profile models. The measuring system of the UTCC was designed and experimentally verified on a multiphase flow loop. The results indicate that the proposed system and correlations estimate the overall flow velocity at an uncertainty of U J   =  0.038 m s-1, and the water superficial velocity at U Jw   =  0.026 m s-1, and oil superficial velocity at U Jo   =  0.034 m s-1. The influencing factors of uncertainty were analyzed.

  12. Quantum Capacitance of a Topological Insulator-Ferromagnet Interface.

    Science.gov (United States)

    Siu, Zhuo Bin; Chowdhury, Debashree; Jalil, Mansoor B A; Basu, Banasri

    2017-03-24

    We study the quantum capacitance in a topological insulator thin film system magnetized in the in-plane direction in the presence of an out-of-plane magnetic field and hexagonal warping. To first order, the modification in quantum capacitance due to hexagonal warping compared to the clean case, where both the in-plane magnetization and hexagonal warping are absent, is always negative, and increases in magnitude monotonically with the energy difference from the charge neutrality point. In contrast, the change in the quantum capacitance due to in-plane magnetization oscillates with the energy in general, except when a certain relation between the inter-surface coupling, out of plane Zeeman energy splitting and magnetic field strength is satisfied. In this special case, the quantum capacitance remains unchanged by the in-plane magnetization for all energies.

  13. High Voltage Bi-directional Flyback Converter for Capacitive Actuator

    DEFF Research Database (Denmark)

    Thummala, Prasanth; Zhang, Zhe; Andersen, Michael A. E.

    2013-01-01

    This paper presents a high voltage DC-DC converter topology for bi-directional energy transfer between a low voltage DC source and a high voltage capacitive load. The topology is a bi-directional flyback converter with variable switching frequency control during the charge mode, and constant...... switching frequency control during the discharge mode. The converter is capable of charging the capacitive load from 24 V DC source to 2.5 kV, and discharges it to 0 V. The flyback converter has been analyzed in detail during both charge and discharge modes, by considering all the parasitic elements...... in the converter, including the most dominating parameters of the high voltage transformer viz., self-capacitance and leakage inductance. The specific capacitive load for this converter is a dielectric electro active polymer (DEAP) actuator, which can be used as an effective replacement for conventional actuators...

  14. Topology Optimization of Stressed Capacitive RF MEMS Switches

    DEFF Research Database (Denmark)

    Philippine, Mandy A.; Sigmund, Ole; Rebeiz, Gabriel M.

    2013-01-01

    Geometry design can improve a capacitive radio-frequency microelectromechanical system switch's reliability by reducing the impacts of intrinsic biaxial stresses and stress gradients on the switch's membrane. Intrinsic biaxial stresses cause stress stiffening, whereas stress gradients cause out...

  15. A Review of High Voltage Drive Amplifiers for Capacitive Actuators

    DEFF Research Database (Denmark)

    Huang, Lina; Zhang, Zhe; Andersen, Michael A. E.

    2012-01-01

    This paper gives an overview of the high voltage amplifiers, which are used to drive capacitive actuators. The amplifiers for both piezoelectric and DEAP (dielectric electroactive polymer) actuator are discussed. The suitable topologies for driving capacitive actuators are illustrated in detail, ......, including linear as well as switched mode amplifiers. In the past much attention has been paid on the driver for piezoelectric actuator. As DEAP is a type of new material, there is not much literature reference for it.......This paper gives an overview of the high voltage amplifiers, which are used to drive capacitive actuators. The amplifiers for both piezoelectric and DEAP (dielectric electroactive polymer) actuator are discussed. The suitable topologies for driving capacitive actuators are illustrated in detail...

  16. Voidage measurement based on genetic algorithm and electrical capacitance tomography

    Institute of Scientific and Technical Information of China (English)

    WANG Wei-wei; WANG Bao-liang; HUANG Zhi-yao; LI Hai-qing

    2005-01-01

    A new voidage measurement method based on electrical capacitance tomography (ECT) technique, Genetic Algorithm (GA) and Partial Least Square (PLS) method was proposed. The voidage measurement model, linear capacitance combination, was developed to measure on-line voidage. GA and PLS method were used to determine the coefficients of the voidage measurement model. GA was used to explore the optimal capacitance combination which gave significant contribution to the voidage measurement. PLS method was applied to determine the weight coefficient of the contribution of each capacitance to the voidage measurement. Flow pattern identification result was introduced to improve the voidage measurement accuracy. Experimental results showed that the proposed voidage measurement method is effective and that the measurement accuracy is satisfactory.

  17. Fringe Capacitance of a Parallel-Plate Capacitor.

    Science.gov (United States)

    Hale, D. P.

    1978-01-01

    Describes an experiment designed to measure the forces between charged parallel plates, and determines the relationship among the effective electrode area, the measured capacitance values, and the electrode spacing of a parallel plate capacitor. (GA)

  18. Structure and Capacitance of Electrical Double Layers inside Micropores

    Science.gov (United States)

    Feng, Guang; Qiao, Rui; Huang, Jingsong; Sumpter, Bobby G.; Meunier, Vincent

    2010-03-01

    Recent experiments indicate that the specific capacitance of micropores (diameter less than 2nm) increases anomalously as the pore size decreases^[1]. To understand the physical origin of this discovery, we performed a series of molecular dynamics simulations to study the electrical double layers (EDLs) in micropores with different shapes (tube vs slit) and pore sizes (0.668nm - 3.342nm). Several different aqueous electrolytes (K^+, Na^+, Cl^-, and F^- in water) were used in these micropores. We quantified the structure of EDLs inside the pores, and computed the capacitance of EDLs. The scaling of capacitance shows a qualitative agreement with the experimental observations. We attribute the anomalous enhancement of capacitance in micropores to the short-range ionelectrode and ionsolvent interactions.[1] J. Chmiola, G. Yushin, Y. Gogotsi, C. Portet, P. Simon, and P.L. Taberna, Science 2006, 313, 1760.

  19. Prostaglandin modulation of mouse and human sperm capacitation.

    Science.gov (United States)

    Herrero, M B; Viggiano, J M; Boquet, M; Gimeno, M A

    1997-09-01

    To determine whether prostaglandins produce a capacitation and/or acrosome reaction, the effect of prostaglandins on capacitated mouse spermatozoa and the effect of prostaglandin pre-incubation on human and mouse spermatozoa were studied. Prostaglandins did not induce an acrosome reaction in capacitated mouse sperm. PGE1 pre-incubation in a protein-free medium enhanced acrosome loss of mouse sperm challenged with A-23187 or solubilized mouse zona pellucida. Human sperm were pre-incubated in media containing prostaglandins, and an acrosome reaction was induced with calcium ionophore or human follicular fluid. PGE1 pre-incubation enhanced acrosome loss by human sperm when the action was induced with calcium ionophore, but had no effect on follicular fluid induction. We conclude that PGE1 acts as a capacitating factor in vitro for mouse spermatozoa, and enhances acrosome-reaction induction with calcium ionophore in human spermatozoa.

  20. Capacitive Coupling in Double-Circuit Transmission Lines

    Directory of Open Access Journals (Sweden)

    Zdenka Benesova

    2004-01-01

    Full Text Available The paper describes an algorithm for calculation of capacitances and charges on conductors in systems with earth wires and in double-circuit overhead lines with respect to phase arrangement. A balanced voltage system is considered. A suitable transposition of individual conductors enables to reduce the electric and magnetic fields in vicinity of overhead lines and to limit the inductive and capacitive linkage. The procedure is illustrated on examples the results of which lead to particular recommendations for designers.

  1. Current Progress of Capacitive Deionization for Removal of Pollutant Ions

    Science.gov (United States)

    Gaikwad, Mahendra S.; Balomajumder, Chandrajit

    2016-08-01

    A mini review of a recently developing water purification technology capacitive deionization (CDI) applied for removal of pollutant ions is provided. The current progress of CDI for removal of different pollutant ions such as arsenic, fluoride, boron, phosphate, lithium, copper, cadmium, ferric, and nitrate ions is presented. This paper aims at motivating new research opportunities in capacitive deionization technology for removal of pollutant ions from polluted water.

  2. Capacitance Variation of Electrolyte-Gated Bilayer Graphene Based Transistors

    OpenAIRE

    Hediyeh Karimi; Rubiyah Yusof; Mohammad Taghi Ahmadi; Mehdi Saeidmanesh; Meisam Rahmani; Elnaz Akbari; Wong King Kiat

    2013-01-01

    Quantum capacitance of electrolyte-gated bilayer graphene field-effect transistors is investigated in this paper. Bilayer graphene has received huge attention due to the fact that an energy gap could be opened by chemical doping or by applying external perpendicular electric field. So, this extraordinary property can be exploited to use bilayer graphene as a channel in electrolyte-gated field-effect transistors. The quantum capacitance of bi-layer graphene with an equivalent circuit is presen...

  3. Modeling high-frequency capacitance in SOI MOS capacitors

    Science.gov (United States)

    Łukasiak, Lidia; Jasiński, Jakub; Beck, Romuald B.; Ikraiam, Fawzi A.

    2016-12-01

    This paper presents a model of high frequency capacitance of a SOI MOSCAP. The capacitance in strong inversion is described with minority carrier redistribution in the inversion layer taken into account. The efficiency of the computational process is significantly improved. Moreover, it is suitable for the simulation of thin-film SOI structures. It may also be applied to the characterization of non-standard SOI MOSCAPS e.g. with nanocrystalline body.

  4. Optimizing the Materials Response in Humidity Capacitive Sensors

    Directory of Open Access Journals (Sweden)

    Elham Noroozi Afshar

    2015-10-01

    Full Text Available The number of humidity outputs on the cap of a cylindrical capacitance sensor is optimized by designing three different probes with direct and indirect windows. The time interval is measured within which 30-70 % humidity can influence the dielectric constant and conductivity of the capacitance when exposed to a range of relative humidity. It is then compared with a simple set-up including a simplified equivalent circuit. The direct probes had four and double outputs on the window of the cylindrical capacitive sensor while the indirect probe had a thin plastic layer only. We observed that the dielectric constant and its conductivity depend closely to the humidity outgoing pathway and also to the increasing rate of humidity between the capacitance plates. The final variation in the materials properties alters the capacitance of the sensor which is measured simply by a LCR. This technique presents a simple method for tracking the recovery and reliability of the humidity sensors over time and assists in optimizing and controlling the materials response to the relative environment humidity. As a result, by controlling the environment humidity rate (0.02 %/s., we could measure the increment rate of capacitance with accuracy of 0.01 pf/%.

  5. Simulation Study on Quantum Capacitances of Graphene Nanoribbon VLSI Interconnects

    Science.gov (United States)

    Dutta, Arin; Rahman, Silvia; Nandy, Turja; Mahmood, Zahid Hasan

    2016-03-01

    In this paper, study on the capacitive effects of Graphene nanoribbon (GNR) in VLSI interconnect has been studied as a function of GNR width, Fermi function and gate voltage. The quantum capacitance of GNR has been simulated in terms of Fermi function for three different values of insulator thickness — 1.5nm, 2nm and 2.5nm. After that, quantum capacitance is studied in both degenerate and nondegenerate region with respect to Fermi function and gate voltage of range 1-5V. Then, the total capacitance of GNR is studied as a function of gate voltage of -2-5V range at degenerate and nondegenerate regions, where width of GNR is considered 4nm. Finally, the total capacitance of GNR is studied in both regions with varying GNR width, considering fixed gate voltage of 3V. After analyzing these simulations, it has been found that GNR in degenerate region shows nearly steady capacitance under a certain applied gate voltage.

  6. Picosecond and nanosecond pulse delivery through a hollow-core Negative Curvature Fiber for micro-machining applications.

    Science.gov (United States)

    Jaworski, Piotr; Yu, Fei; Maier, Robert R J; Wadsworth, William J; Knight, Jonathan C; Shephard, Jonathan D; Hand, Duncan P

    2013-09-23

    We present high average power picosecond and nanosecond pulse delivery at 1030 nm and 1064 nm wavelengths respectively through a novel hollow-core Negative Curvature Fiber (NCF) for high-precision micro-machining applications. Picosecond pulses with an average power above 36 W and energies of 92 µJ, corresponding to a peak power density of 1.5 TWcm⁻² have been transmitted through the fiber without introducing any damage to the input and output fiber end-faces. High-energy nanosecond pulses (>1 mJ), which are ideal for micro-machining have been successfully delivered through the NCF with a coupling efficiency of 92%. Picosecond and nanosecond pulse delivery have been demonstrated in fiber-based laser micro-machining of fused silica, aluminum and titanium.

  7. Magnetization-induced double-layer capacitance enhancement in active carbon/Fe3O4 nanocomposites

    Institute of Scientific and Technical Information of China (English)

    Guoxiang Wang; Hongfeng Xu; Lu Lu; Hong Zhao

    2014-01-01

    The effects of magnetic fields on electrochemical processes have made a great impact on both theoretical and practical significances in im-proving capacitor performance. In this study, active carbon/Fe3O4-NPs nanocomposites (AC/Fe3O4-NPs) were synthesized using a facile hy-drothermal method and ultrasonic technique. Transmission electron micrographs (TEM) showed that Fe3O4 nanoparticles (Fe3O4-NPs) grew along the edge of AC. AC/Fe3O4-NPs nanocomposites were further used as an electrochemical electrode, and its electrochemical performance was tested under magnetization and non-magnetization conditions, respectively, in a three-electrode electrochemical device. Micro-magnetic field could improve the electric double-layer capacitance, reduce the charge transfer resistance, and enhance the discharge performance. The capacitance enhancement of magnetized electrode was increased by 33.1%at the current density of 1 A/g, and the energy density was improved to 15.97 Wh/kg, due to the addition of magnetic particles.

  8. Micromachined PIN-PMN-PT Crystal Composite Transducer for High-Frequency Intravascular Ultrasound (IVUS) Imaging

    OpenAIRE

    Li, Xiang; Ma, Teng; Tian, Jian; Han, Pengdi; Zhou, Qifa; Shung, K. Kirk

    2014-01-01

    In this paper, we report the use of micromachined PbIn1/2Nb1/2O3–PbMg1/3Nb2/3O3–PbTiO3 (PIN-PMN-PT) single crystal 1–3 composite material for intravascular ultrasound (IVUS) imaging application. The effective electromechanical coupling coefficient kt(eff) of the composite was measured to be 0.75 to 0.78. Acoustic impedance was estimated to be 20 MRayl. Based on the composite, needle-type and flexible-type IVUS transducers were fabricated. The composite transducer achieved an 86% bandwidth at ...

  9. A Ku-Band Novel Micromachined Bandpass Filter with Two Transmission Zeros

    CERN Document Server

    Yong, Zhang; Yuanwei, Yu; Chen, Chen; Xing, Jia Shi

    2007-01-01

    This paper presents a micromachined bandpass filter with miniature size that has relatively outstanding performance. A silicon-based eight-order microstrip bandpass filter is fabricated and measured. A novel design method of the interdigital filter that can create two transmission zeros is described. The location of the transmission zeros can be shifted arbitrarily in the stopband. By adjusting the zero location properly, the filter provides much better skirt rejection and lower insertion loss than a conventional microstrip interdigital filter. To reduce the chip size, through-silicon-substrate-via-hole is used. Good experimental results are obtained.

  10. Mask synthesis and verification based on geometric model for surface micro-machined MEMS

    Institute of Scientific and Technical Information of China (English)

    LI Jian-hua; LIU Yu-sheng; GAO Shu-ming

    2005-01-01

    Traditional MEMS (microelectromechanical system) design methodology is not a structured method and has become an obstacle for MEMS creative design. In this paper, a novel method of mask synthesis and verification for surface micro-machined MEMS is proposed, which is based on the geometric model of a MEMS device. The emphasis is focused on synthesizing the masks at the basis of the layer model generated from the geometric model of the MEMS device. The method is comprised of several steps: the correction of the layer model, the generation of initial masks and final masks including multi-layer etch masks, and mask simulation. Finally some test results are given.

  11. Micromachining And Pattering In Micro/Nano Scale On Macroscopic Areas

    Directory of Open Access Journals (Sweden)

    Marczak J.

    2015-09-01

    Full Text Available This paper presents detailed discussion of selected examples of laser technologies for the modification of solid surfaces, including topographic and microstructural changes as well as both these alterations simultaneously. Laser surface micromachining has just entered the new generation of technologies that are used in surface engineering. It will be shown on the examples of applications in bioengineering, on the base of the author’s own research, in modification of materials such as titanium and its alloys, diamond-like layers (DLC deposited on silicon and polymer substrates.

  12. A novel hybrid surface micromachined segmented mirror for large aperture laser applications

    Institute of Scientific and Technical Information of China (English)

    Jie Li; Haiqing Chen; Hongbin Yu

    2006-01-01

    @@ A novel hybrid surface micromachined segmented mirror array is described. This device is capable of scaling to large apertures for correcting time-varying aberrations in laser applications. Each mirror is composed of bottom electrode, support part, and mirror plate, in which a T-shaped beam structure is used to support the mirror plate. It can provide mirror with vertical movement and rotation around two horizontal axes. The test results show that the maximum deflection along the vertical direction of the mirror plate is 2μm, while the rotation angles around x and y axes are ±2.3° and ±1.45°, respectively.

  13. 5-level polysilicon surface micromachine technology: Application to complex mechanical systems

    Energy Technology Data Exchange (ETDEWEB)

    Rodgers, M.S.; Sniegowski, J.J.

    1998-06-01

    The authors recently reported on the development of a 5-level poly-ilicon surface micromachine fabrication process consisting of four levels of mechanical poly plus an electrical interconnect layer. They are now reporting on the first components designed for and fabricated in this process. These are demonstration systems, which definitively show that five levels of polysilicon provide greater performance, reliability, and significantly increased functionality. This new technology makes it possible to realize levels of system complexity that have so far only existed on paper, while simultaneously adding to the robustness of many of the individual subassemblies.

  14. Micro-tensile tests on micromachined metal on polymer specimens: elasticity, plasticity and rupture

    CERN Document Server

    Seguineau, C; Malhaire, C; Brida, S; Lafontan, X; Desmarres, J -M; Josserond, C; Debove, L

    2008-01-01

    This study is focused on the mechanical characterization of materials used in microelectronic and micro- electromechanical systems (MEMS) devices. In order to determine their mechanical parameters, a new deformation bench test with suitable micromachined specimens have been developed. Uniaxial tensile tests were performed on "low cost" specimens, consisting in electroplated thin copper films and structures, deposited on a polimide type substrate. Moreover, a cyclic mechanical actuation via piezoelectric actuators was tested on the same deformation bench. These experiments validate the device for performing dynamic characterization of materials, and reliability studies of different microstructures.

  15. Numerical modelling of micro-machining of f.c.c. single crystal: Influence of strain gradients

    KAUST Repository

    Demiral, Murat

    2014-11-01

    A micro-machining process becomes increasingly important with the continuous miniaturization of components used in various fields from military to civilian applications. To characterise underlying micromechanics, a 3D finite-element model of orthogonal micro-machining of f.c.c. single crystal copper was developed. The model was implemented in a commercial software ABAQUS/Explicit employing a user-defined subroutine VUMAT. Strain-gradient crystal-plasticity and conventional crystal-plasticity theories were used to demonstrate the influence of pre-existing and evolved strain gradients on the cutting process for different combinations of crystal orientations and cutting directions. Crown Copyright © 2014.

  16. Laser ultrasonics for bulk-density distribution measurement on green ceramic tiles

    Science.gov (United States)

    Revel, G. M.; Cavuto, A.; Pandarese, G.

    2016-10-01

    In this paper a Laser Ultrasonics (LUT) system is developed and applied to measure bulk density distribution of green ceramic tiles, which are porous materials with low heat conductivity. Bulk density of green ceramic bodies is a fundamental parameter to be kept under control in the industrial production of ceramic tiles. The LUT system proposed is based on a Nd:YAG pulsed laser for excitation and an air-coupled electro-capacitive transducer for detection. The paper reports experimental apparent bulk-density measurements on white ceramic bodies after a calibration procedures. The performances observed are better than those previously achieved by authors using air-coupled ultrasonic probes for both emission and detection, allowing to reduce average uncertainty down to about ±6 kg/m3 (±0.3%), thanks to the increase in excitation efficiency and lateral resolution, while maintaining potential flexibility for on-line application. The laser ultrasonic procedure proposed is available for both on-line and off-line application. In this last case it is possible to obtain bulk density maps with high spatial resolution by a 2D scan without interrupting the production process.

  17. Computer-controlled Sophisticated Ultrasonic Cleaner

    Directory of Open Access Journals (Sweden)

    H. Muthurajan

    2007-01-01

    Full Text Available The significant advantage of ultrasonic cleaning technique is the abilities to clean the delicateand complex shape materials without damaging their surfaces quickly. Ultrasonic cleaners havefound increasing applications in a variety of industries because these offer an environmentallygood alternative to ozone-depleting compounds and hazardous solvents. Also, ultrasonicvibration is one of the methods for chemical synthesis (chemical reaction and of yieldenhancement of chemical engineering process. Consequently, there is a need to developmultipurpose ultrasonic cleaner/vibrator using computer control, which can be used to set thevarious performance parameter of ultrasonic vibrator such as frequency, duty cycle, continuous/pulsed mode, duration of operation, and thermal profile of tank during the process. An ultrasoniccleaner was developed using an oscillator circuit and the duration of oscillator circuit functioningcan be set through the computer. Computerised ultrasonic cleaner using indigenously madepiezoceramic transducers and their advantages over the conventional ultrasonic cleaners are discussed.

  18. Negative capacitance for ultra-low power computing

    Science.gov (United States)

    Khan, Asif Islam

    Owing to the fundamental physics of the Boltzmann distribution, the ever-increasing power dissipation in nanoscale transistors threatens an end to the almost-four-decade-old cadence of continued performance improvement in complementary metal-oxide-semiconductor (CMOS) technology. It is now agreed that the introduction of new physics into the operation of field-effect transistors---in other words, "reinventing the transistor'"--- is required to avert such a bottleneck. In this dissertation, we present the experimental demonstration of a novel physical phenomenon, called the negative capacitance effect in ferroelectric oxides, which could dramatically reduce power dissipation in nanoscale transistors. It was theoretically proposed in 2008 that by introducing a ferroelectric negative capacitance material into the gate oxide of a metal-oxide-semiconductor field-effect transistor (MOSFET), the subthreshold slope could be reduced below the fundamental Boltzmann limit of 60 mV/dec, which, in turn, could arbitrarily lower the power supply voltage and the power dissipation. The research presented in this dissertation establishes the theoretical concept of ferroelectric negative capacitance as an experimentally verified fact. The main results presented in this dissertation are threefold. To start, we present the first direct measurement of negative capacitance in isolated, single crystalline, epitaxially grown thin film capacitors of ferroelectric Pb(Zr0.2Ti0.8)O3. By constructing a simple resistor-ferroelectric capacitor series circuit, we show that, during ferroelectric switching, the ferroelectric voltage decreases, while the stored charge in it increases, which directly shows a negative slope in the charge-voltage characteristics of a ferroelectric capacitor. Such a situation is completely opposite to what would be observed in a regular resistor-positive capacitor series circuit. This measurement could serve as a canonical test for negative capacitance in any novel

  19. Ultrasonic material hardness depth measurement

    Science.gov (United States)

    Good, Morris S.; Schuster, George J.; Skorpik, James R.

    1997-01-01

    The invention is an ultrasonic surface hardness depth measurement apparatus and method permitting rapid determination of hardness depth of shafts, rods, tubes and other cylindrical parts. The apparatus of the invention has a part handler, sensor, ultrasonic electronics component, computer, computer instruction sets, and may include a display screen. The part handler has a vessel filled with a couplant, and a part rotator for rotating a cylindrical metal part with respect to the sensor. The part handler further has a surface follower upon which the sensor is mounted, thereby maintaining a constant distance between the sensor and the exterior surface of the cylindrical metal part. The sensor is mounted so that a front surface of the sensor is within the vessel with couplant between the front surface of the sensor and the part.

  20. Integrated Ultrasonic-Photonic Devices

    DEFF Research Database (Denmark)

    Barretto, Elaine Cristina Saraiva

    This thesis deals with the modeling, design, fabrication and characterization of integrated ultrasonic-photonic devices, with particular focus on the use of standard semiconductor materials such as GaAs and silicon. The devices are based on the use of guided acoustic waves to modulate the light...... systems, all in search for paths to improve acousto-optic interaction. Some of the solutions proposed lead to enhancements of up to two orders of magnitude in the eciency of the device. The main aspects related to the design of the devices are discussed, including single-mode guidance, optical coupling......, integration and cost. The design proves to be robust towards fabrication and design tolerances. Several uses for this device are proposed, opening up a whole new group of applications for this class of integrated ultrasonic-photonic devices....

  1. Ultrasonic enhancement of battery diffusion.

    Science.gov (United States)

    Hilton, R; Dornbusch, D; Branson, K; Tekeei, A; Suppes, G J

    2014-03-01

    It has been demonstrated that sonic energy can be harnessed to enhance convection in Galvanic cells during cyclic voltammetry; however, the practical value of this approach is limited due to the lack of open volumes for convection patterns to develop in most batteries. This study evaluates the ability of ultrasonic waves to enhance diffusion in membrane separators commonly used in sandwich-architecture batteries. Studies include the measuring of open-circuit performance curves to interpret performances in terms of reductions in concentration overpotentials. The use of a 40 kHz sonicator bath can consistently increase the voltage of the battery and reduce overpotential losses up to 30%. This work demonstrates and quantifies battery enhancement due to enhanced diffusion made possible with ultrasonic energy.

  2. Ultrasonic attenuation in pearlitic steel.

    Science.gov (United States)

    Du, Hualong; Turner, Joseph A

    2014-03-01

    Expressions for the attenuation coefficients of longitudinal and transverse ultrasonic waves are developed for steel with pearlitic microstructure. This type of lamellar duplex microstructure influences attenuation because of the lamellar spacing. In addition, longitudinal attenuation measurements were conducted using an unfocused transducer with 10 MHz central frequency on the cross section of a quenched railroad wheel sample. The dependence of longitudinal attenuation on the pearlite microstructure is observed from the changes of longitudinal attenuation from the quenched tread surface to deeper locations. The results show that the attenuation value is lowest and relatively constant within the quench depth, then increases linearly. The experimental results demonstrate a reasonable agreement with results from the theoretical model. Ultrasonic attenuation provides an important non-destructive method to evaluate duplex microstructure within grains which can be implemented for quality control in conjunction with other manufacturing processes.

  3. Ultrasonic characterization of yogurt fermentation process

    OpenAIRE

    2012-01-01

    International audience; The objective of this work is to characterize the fermentation of yogurt based on an ultrasonic technique. Conventionally, the acidity of the yogurt is measured by a pH meter to determine the progress of fermentation. However, the pH meter should be cleaned and calibrated for each measurement and, therefore, this method is not practical. In this regard, ultrasonic techniques are fast, non-invasive and inexpensive. The measurement of ultrasonic parameters such as amplit...

  4. Littoral Subsonic Seismoacoustic Phenomena Ultrasonic Modeling

    Science.gov (United States)

    2016-06-07

    Littoral Subsonic Seismoacoustic Phenomena Ultrasonic Modeling Jacques R. Chamuel Sonoquest Advanced Ultrasonics Research P.O. Box 81153 Wellesley... variable water/air content, and benthic shelled animals leading to accurate acoustic modeling of littoral surficial layer and geophysical inversion...UNIT NUMBER 7. PERFORMING ORGANIZATION NAME(S) AND ADDRESS(ES) Sonoquest Advanced Ultrasonics Research ,P.O. Box 81153,Wellesley Hills,MA,02481-0001 8

  5. Studies on Ultrasonic Spray Dryer (1)

    OpenAIRE

    井上, 昌夫

    1981-01-01

    Author has initiated research and development activities for a epochal ultrasonic spray dryer in order to obtain large quantities of droplets in uniform diameters, from which a practically applicable ultrasonic spray dryer would possibly be developed. Since the time Wood, Loomis et al. reported their experiments on atomization of liquids by ultrasonic power, research in this field is now widely attempted in many countries. In Japan, this field is being investigated by Ohno et al. Chiba, and M...

  6. Analysis of the Rotary Ultrasonic Machining Mechanism

    Institute of Scientific and Technical Information of China (English)

    2002-01-01

    Ultrasonic machining (USM) is considered as an effective method for machining hard and brittle materials such as glass, engineering ceramics, semiconductors, diamonds, metal composites and so on. However, the low material removal rate due to using abrasive slurry limits further application of USM. Rotary ultrasonic machining (rotary USM) superimposes rotational movement on the tool head that vibrates at ultrasonic frequency (20 kHz) simultaneously. The tool is made of mild steel coated or bonded with diamon...

  7. The Influence of the Ultrasonic Intensity on the Cleaning Efficacy of Passive Ultrasonic Irrigation

    NARCIS (Netherlands)

    Jiang, Lei-Meng; Verhaagen, Bram; Versluis, Michel; Langedijk, Jelmer; Wesselink, Paul; van der Sluis, Lucas W. M.

    2011-01-01

    Introduction: It is not clear whether increasing the ultrasonic intensity would enhance the cleaning efficacy of passive ultrasonic irrigation (PUI) inside a root canal. The aim of this study was to evaluate the effect of the ultrasonic intensity on PUI to remove dentin debris and whether there is a

  8. Capacitance-Based Frequency Adjustment of Micro Piezoelectric Vibration Generator

    Directory of Open Access Journals (Sweden)

    Xinhua Mao

    2014-01-01

    Full Text Available Micro piezoelectric vibration generator has a wide application in the field of microelectronics. Its natural frequency is unchanged after being manufactured. However, resonance cannot occur when the natural frequencies of a piezoelectric generator and the source of vibration frequency are not consistent. Output voltage of the piezoelectric generator will sharply decline. It cannot normally supply power for electronic devices. In order to make the natural frequency of the generator approach the frequency of vibration source, the capacitance FM technology is adopted in this paper. Different capacitance FM schemes are designed by different locations of the adjustment layer. The corresponding capacitance FM models have been established. Characteristic and effect of the capacitance FM have been simulated by the FM model. Experimental results show that the natural frequency of the generator could vary from 46.5 Hz to 42.4 Hz when the bypass capacitance value increases from 0 nF to 30 nF. The natural frequency of a piezoelectric vibration generator could be continuously adjusted by this method.

  9. Capacitance and compressibility of heterostructures with strong electronic correlations

    Science.gov (United States)

    Steffen, Kevin; Frésard, Raymond; Kopp, Thilo

    2017-01-01

    Strong electronic correlations related to a repulsive local interaction suppress the electronic compressibility in a single-band model, and the capacitance of a corresponding metallic film is directly related to its electronic compressibility. Both statements may be altered significantly when two extensions to the system are implemented which we investigate here: (i) we introduce an attractive nearest-neighbor interaction V as antagonist to the repulsive onsite repulsion U , and (ii) we consider nanostructured multilayers (heterostructures) assembled from two-dimensional layers of these systems. We determine the respective total compressibility κ and capacitance C of the heterostructures within a strong coupling evaluation, which builds on a Kotliar-Ruckenstein slave-boson technique. Whereas the capacitance C (n ) for electronic densities n close to half-filling is suppressed, illustrated by a correlation induced dip in C (n ) , it may be appreciably enhanced close to a van Hove singularity. Moreover, we show that the capacitance may be a nonmonotonic function of U close to half-filling for both attractive and repulsive V . The compressibility κ can differ from C substantially, as κ is very sensitive to internal electrostatic energies which in turn depend on the specific setup of the heterostructure. In particular, we show that a capacitor with a polar dielectric has a smaller electronic compressibility and is more stable against phase separation than a standard nonpolar capacitor with the same capacitance.

  10. Recent advances in understanding the capacitive storage in microporous carbons

    Energy Technology Data Exchange (ETDEWEB)

    Daffos, B.; Taberna, P.L. [Universite de Toulouse, CIRIMAT, UMR-CNRS 5085, Toulouse (France); Gogotsi, Y. [Department of Materials Science and Engineering, A.J. Drexel Nanotechnology Institute, Drexel University, Philadelphia, PA (United States); Simon, P.

    2010-10-15

    This paper presents a review of our recent work on capacitance of carbide-derived carbons (CDCs). Specific capacitance as high as 14 {mu}F cm{sup -2} or 160 F g{sup -1} was achieved using CDCs with tailored subnanometer pore size, which is significantly higher than 6 {mu}F cm{sup -2} or 100 F g{sup -1} for conventional activated carbons. Such high capacitance was obtained in several types of organic electrolytes with or without solvent. A maximum is obtained for the carbons with the mean pore size close to the bare ion size, ruling out the traditional point of view that mesoporosity is highly required for maximum capacitance. Surprisingly, carbons with subnanometer porosity exhibit high capacitance retention, since only a 10% loss is measured when 6 A g{sup -1} discharge is drawn. These findings show the importance of fitting the ion size with the mean pore size. The double layer theory falls short to explain such charge storage mechanisms at the nanometer scale; thus atomistic modelling is required to find out an alternative charge storage model. (Abstract Copyright [2010], Wiley Periodicals, Inc.)

  11. Microprocessor-controlled ultrasonic plethysmograph

    Science.gov (United States)

    Bhagat, P. K.; Wu, V. C.

    1981-01-01

    Safe, nonintrusive microprocessor system times ultrasonic pulses to measure limb cross-sectional area. Simple instrument requires no calibration and does not confine leg movement, making tests relating limb volume to activity level possible. Program considers more realistic geometries of human limb than circular cross-sections and monitors changes in area with great accuracy. Errors due to body temperature changes and timing roundoff are insignificant.

  12. Nonlinear ultrasonic phased array imaging.

    Science.gov (United States)

    Potter, J N; Croxford, A J; Wilcox, P D

    2014-10-03

    This Letter reports a technique for the imaging of acoustic nonlinearity. By contrasting the energy of the diffuse field produced through the focusing of an ultrasonic array by delayed parallel element transmission with that produced by postprocessing of sequential transmission data, acoustic nonlinearity local to the focal point is measured. Spatially isolated wave distortion is inferred without requiring interrogation of the wave at the inspection point, thereby allowing nonlinear imaging through depth.

  13. Nonlinear Ultrasonic Phased Array Imaging

    Science.gov (United States)

    Potter, J. N.; Croxford, A. J.; Wilcox, P. D.

    2014-10-01

    This Letter reports a technique for the imaging of acoustic nonlinearity. By contrasting the energy of the diffuse field produced through the focusing of an ultrasonic array by delayed parallel element transmission with that produced by postprocessing of sequential transmission data, acoustic nonlinearity local to the focal point is measured. Spatially isolated wave distortion is inferred without requiring interrogation of the wave at the inspection point, thereby allowing nonlinear imaging through depth.

  14. Nonlinear ultrasonic phased array imaging

    OpenAIRE

    Potter, J N; Croxford, A.J.; Wilcox, P. D.

    2014-01-01

    This Letter reports a technique for the imaging of acoustic nonlinearity. By contrasting the energy of the diffuse field produced through the focusing of an ultrasonic array by delayed parallel element transmission with that produced by postprocessing of sequential transmission data, acoustic nonlinearity local to the focal point is measured. Spatially isolated wave distortion is inferred without requiring interrogation of the wave at the inspection point, thereby allowing nonlinear imaging t...

  15. Ultrasonic Dynamic Vector Stress Sensor

    Science.gov (United States)

    Heyman, Joseph S.; Froggatt, Mark

    1992-01-01

    Stress inferred from measurements in specimens rather than in bonded gauges. Ultrasonic dynamic vector stress sensor (UDVSS) measures changes in dynamic directional stress occurring in material or structure at location touched by device when material or structure put under cyclic load. Includes phase-locked loop, synchronous amplifier, and contact probe. Useful among manufacturers of aerospace and automotive structures for stress testing and evaluation of designs.

  16. Ultrasonic Linear Motor with Anisotropic Composite

    Institute of Scientific and Technical Information of China (English)

    曾周末; 王新辉; 赵伯雷

    2004-01-01

    An idea to make up the vibrating body of ultrasonic motor with anisotropic composite is proposed and a linear piezoelectric motor is developed in this paper. Relative problems such as actuating mechanism, resonant frequency are discussed theoretically. According to the feature that impulse exists between the elastic body of composite ultrasonic linear motor and the base, an impulse analysis is presented to calculate the motor′s friction driving force and frictional conversion efficiency. The impulse analysis essentially explains the reason why the ultrasonic motor has great driving force, and can be applied to analyze the non-linear ultrasonic motor.

  17. Predictive simulation of nonlinear ultrasonics

    Science.gov (United States)

    Shen, Yanfeng; Giurgiutiu, Victor

    2012-04-01

    Most of the nonlinear ultrasonic studies to date have been experimental, but few theoretical predictive studies exist, especially for Lamb wave ultrasonic. Compared with nonlinear bulk waves and Rayleigh waves, nonlinear Lamb waves for structural health monitoring become more challenging due to their multi-mode dispersive features. In this paper, predictive study of nonlinear Lamb waves is done with finite element simulation. A pitch-catch method is used to interrogate a plate with a "breathing crack" which opens and closes under tension and compression. Piezoelectric wafer active sensors (PWAS) used as transmitter and receiver are modeled with coupled field elements. The "breathing crack" is simulated via "element birth and death" technique. The ultrasonic waves generated by the transmitter PWAS propagate into the structure, interact with the "breathing crack", acquire nonlinear features, and are picked up by the receiver PWAS. The features of the wave packets at the receiver PWAS are studied and discussed. The received signal is processed with Fast Fourier Transform to show the higher harmonics nonlinear characteristics. A baseline free damage index is introduced to assess the presence and the severity of the crack. The paper finishes with summary, conclusions, and suggestions for future work.

  18. Estimation of Transformer Winding Capacitances through Frequency Response Analysis - An Experimental Investigation

    Science.gov (United States)

    Shah, Krupa; Ragavan, K.

    2013-10-01

    This article focuses on developing a non-invasive method for determining capacitances using frequency response data. The proposed methodology involves acquiring driving-point impedance of the winding under consideration over wide frequency range. With certain terminal conditions and using the terminal impedance measured at specific frequencies, input and shunt capacitances are determined. For the purpose of estimating series capacitance of the winding, an algorithm is proposed. To demonstrate the capability of the method, initially model coils that have provisions for connecting external capacitances are considered. Then, it is found that the estimated values of capacitances are nearly same as those of connected capacitances. The method is, then, extended to transformer winding, and a capacitive ladder network is constructed. To assess the accuracy of estimation, capacitive voltage distribution is utilized. That is, the voltage distribution in the winding is compared with that of synthesized circuit. A good agreement between those data reveals that the estimated capacitance values are accurate.

  19. Simulating Capacitances to Silicon Quantum Dots: Breakdown of the Parallel Plate Capacitor Model

    Science.gov (United States)

    Thorbeck, Ted; Fujiwara, Akira; Zimmerman, Neil M.

    2012-09-01

    Many electrical applications of quantum dots rely on capacitively coupled gates; therefore, to make reliable devices we need those gate capacitances to be predictable and reproducible. We demonstrate in silicon nanowire quantum dots that gate capacitances are reproducible to within 10% for nominally identical devices. We demonstrate the experimentally that gate capacitances scale with device dimensions. We also demonstrate that a capacitance simulator can be used to predict measured gate capacitances to within 20%. A simple parallel plate capacitor model can be used to predict how the capacitances change with device dimensions; however, the parallel plate capacitor model fails for the smallest devices because the capacitances are dominated by fringing fields. We show how the capacitances due to fringing fields can be quickly estimated.

  20. Design, Fabrication, and Testing of a Bulk Micromachined Inertial Measurement Unit

    Directory of Open Access Journals (Sweden)

    Honglong Chang

    2010-04-01

    Full Text Available A bulk micromachined inertial measurement unit (MIMU is presented in this paper. Three single-axis accelerometers and three single-axis gyroscopes were simultaneously fabricated on a silicon wafer using a bulk micromachining process; the wafer is smaller than one square centimeter. In particular, a global area optimization method based on the relationship between the sensitivity and layout area was proposed to determine the layout configuration of the six sensors. The scale factors of the X/Y-axis accelerometer and Z-axis accelerometer are about 213.3 mV/g and 226.9 mV/g, respectively. The scale factors of the X/Y-axis gyroscope and Z-axis gyroscope are about 2.2 mV/o/s and 10.8 mV/o/s, respectively. The bias stability of the X/Y-axis gyroscope and the Z-axis gyroscope are about 2135 deg/h and 80 deg/h, respectively. Finally, the resolutions of X/Y-axis accelerometers, Z-axis accelerometers, X/Y-axis gyroscopes, and Z-axis gyroscopes are 0.0012 g/ √Hz, 0.0011 g/ √Hz, 0.314 °/s/ √Hz, and 0.008 °/s/ √Hz, respectively.

  1. Picosecond laser micromachining of nitinol and platinum-iridium alloy for coronary stent applications

    Energy Technology Data Exchange (ETDEWEB)

    Muhammad, N.; Whitehead, D.; Li, L. [University of Manchester, Laser Processing Research Centre, School of Mechanical, Aerospace and Civil Engineering, Manchester (United Kingdom); Boor, A.; Oppenlander, W. [Swiss Tec AG, Schaan, Principality of Liechtenstein (Liechtenstein); Liu, Z. [University of Manchester, Corrosion and Protection Centre, School of Materials, Manchester (United Kingdom)

    2012-03-15

    The demand for micromachining of coronary stents by means of industrial lasers rises quickly for treating coronary artery diseases, which cause more than one million deaths each year. The most widely used types of laser for stent manufacturing are Nd:YAG laser systems with a wavelength of 1064 nm with pulse lengths of 10{sup -3}-10{sup -2} seconds. Considerable post-processing is required to remove heat-affected zones (HAZ), and to improve surface finishes and geometry. Using a third harmonic laser radiation of picosecond laser (6 x 10{sup -12} s pulse duration) in UV range, the capability of the picosecond laser micromachining of nitinol and platinum-iridium alloy for coronary stent applications are presented. In this study dross-free cut of nitinol and platinum-iridium alloy tubes are demonstrated and topography analysis of the cut surface is carried out. The HAZ characteristics have been investigated by means of microscopic examinations and measurement of micro-hardness distribution near the cut zones. (orig.)

  2. Novel Micromachined Coplanar Waveguide Transmission Lines for Application in Millimeter-Wave Circuits

    Science.gov (United States)

    Park, Jae-Hyoung; Baek, Chang-Wook; Jung, Sanghwa; Kim, Hong-Teuk; Kwon, Youngwoo; Kim, Yong-Kweon

    2000-12-01

    In this paper, novel micromachined coplanar waveguide(CPW) transmission lines for application in millimeter-wave circuits are proposed. Two types of transmission lines with the length of 1 cm are fabricated and the measured characteristics are compared with those of the conventional CPW transmission line. One is the elevated CPW(ECPW) transmission line and the other is the overlay CPW(OCPW) line. These transmission lines are composed of 3-μm-thick electroplated gold lines with overhanging parts. By elevating the metal lines from the substrate using micromachining technology, the conductor and substrate dielectric loss can be reduced and easily integrated with conventional monolithic microwave integrated circuits. Compared with the conventional CPW line showing 2.65 dB/cm insertion loss at 50 GHz, the loss can be reduced to 1.9 dB/cm and 1.25 dB/cm at 50 GHz in the case of the ECPW and OCPW transmission lines, respectively. Also, the OCPW transmission line shows that the insertion loss does not vary with the change of the characteristic impedance. As shown in the measured and simulated results, the insertion loss is maintained below 1.4 dB/cm over wide impedance ranges.

  3. Micromachining of microchannel on the polycarbonate substrate with CO 2 laser direct-writing ablation

    Science.gov (United States)

    Qi, Heng; Chen, Tao; Yao, Liying; Zuo, Tiechuan

    2009-05-01

    Low-power CO 2 laser direct-writing ablation was used to micromachine a microchannel on the polycarbonate substrate in this work. The influence of the process parameters (the laser power, the moving velocity of the laser beam and the scanning times) on the micromachining quality (the depth, the width and their aspect ratio) of the microchannel was experimentally studied. The depth and width of microchannel both increase with the increase of the laser power and the decrease of the moving velocity of the laser beam. When higher laser power and slower moving velocity were used, the polycarbonate surface bore more heat irradiated from the CO 2 laser for longer time which results in the formation of deeper and wider molten pool, hence the ability to fabricate bigger microchannel. Because of the effect of the laser power on the depth and width of microchannels, higher aspect (depth/width) ratio could be achieved using slower moving velocity and higher laser power, and it would reach a steady state when the laser power increases to 9.0 W possibly caused by the effect of laser power on the different directions of microchannel. The polycarbonate-polycarbonate chip was bonded with hot-press bonding technique.

  4. Millimeter length micromachining using a heavy ion nuclear microprobe with standard magnetic scanning

    Energy Technology Data Exchange (ETDEWEB)

    Nesprías, F. [Gerencia de Investigación y Aplicaciones, Comisión Nacional de Energía Atómica, Av. Gral Paz 1499 (1650), San Martín, Buenos Aires (Argentina); Debray, M.E., E-mail: debray@tandar.cnea.gov.ar [Gerencia de Investigación y Aplicaciones, Comisión Nacional de Energía Atómica, Av. Gral Paz 1499 (1650), San Martín, Buenos Aires (Argentina); Escuela de Ciencia y Tecnología. Universidad Nacional de Gral. San Martín, M. De Irigoyen 3100 (1650), San Martín, Buenos Aires (Argentina); Davidson, J. [Gerencia de Investigación y Aplicaciones, Comisión Nacional de Energía Atómica, Av. Gral Paz 1499 (1650), San Martín, Buenos Aires (Argentina); CONICET, Avda. Rivadavia 1917 (C1033AAJ), Ciudad Autónoma de Buenos Aires (Argentina); Kreiner, A.J. [Gerencia de Investigación y Aplicaciones, Comisión Nacional de Energía Atómica, Av. Gral Paz 1499 (1650), San Martín, Buenos Aires (Argentina); Escuela de Ciencia y Tecnología. Universidad Nacional de Gral. San Martín, M. De Irigoyen 3100 (1650), San Martín, Buenos Aires (Argentina); CONICET, Avda. Rivadavia 1917 (C1033AAJ), Ciudad Autónoma de Buenos Aires (Argentina); and others

    2013-04-01

    In order to increase the scanning length of our microprobe, we have developed an irradiation procedure suitable for use in any nuclear microprobe, extending at least up to 400% the length of our heavy ion direct writing facility using standard magnetic exploration. Although this method is limited to patterns of a few millimeters in only one direction, it is useful for the manufacture of curved waveguides, optical devices such Mach–Zehnder modulators, directional couplers as well as channels for micro-fluidic applications. As an example, this technique was applied to the fabrication of 3 mm 3D-Mach–Zehnder modulators in lithium niobate with short Y input/output branches and long shaped parallel-capacitor control electrodes. To extend and improve the quality of the machined structures we developed new scanning control software in LabView™ platform. The new code supports an external dose normalization, electrostatic beam blanking and is capable of scanning figures at 16 bit resolution using a National Instruments™ PCI-6731 High-Speed I/O card. A deep and vertical micromachining process using swift {sup 35}Cl ions 70 MeV bombarding energy and direct write patterning was performed on LiNbO{sub 3}, a material which exhibits a strong natural anisotropy to conventional etching. The micromachined structures show the feasibility of this method for manufacturing micro-fluidic channels as well.

  5. Graphene-enhanced environmentally-benign cutting fluids for high-performance micro-machining applications.

    Science.gov (United States)

    Chu, Bryan; Singh, Eklavya; Koratkar, Nikhil; Samuel, Johnson

    2013-08-01

    A canola-based cutting oil enhanced with graphene platelet (GPL) additives has been developed to fulfill the need for environmentally benign cutting oils for high performance micro-machining applications. Carboxyl-functionalized graphene platelets are used to enable stable GPL dispersion in the polar oil. Three oil formulations consisting of 0.05%, 0.10% and 0.15% GPL by weight are tested. The GPL-laden canola oil is first characterized based on its kinematic viscosity, thermal conductivity and coefficient of friction. Micro-turning tests are then performed to study the effect of GPL loading on the cutting temperature, cutting force, and the surface finish of the part. All tested loadings improve the cooling and lubricating properties of the canola oil. For cooling, this improvement is seen to increase with GPL loading. In the case of lubrication, there appears to be an optimal loading of around 0.10%. The presence of GPL also leads to a decrease in the surface roughness of the micro-machined surface but this improvement drops with increased GPL loading.

  6. Effects of Micromachining Processes on Electro-Osmotic Flow Mobility of Glass Surfaces

    Directory of Open Access Journals (Sweden)

    Norihisa Miki

    2013-03-01

    Full Text Available Silica glass is frequently used as a device material for micro/nano fluidic devices due to its excellent properties, such as transparency and chemical resistance. Wet etching by hydrofluoric acid and dry etching by neutral loop discharge (NLD plasma etching are currently used to micromachine glass to form micro/nano fluidic channels. Electro-osmotic flow (EOF is one of the most effective methods to drive liquids into the channels. EOF mobility is affected by a property of the micromachined glass surfaces, which includes surface roughness that is determined by the manufacturing processes. In this paper, we investigate the effect of micromaching processes on the glass surface topography and the EOF mobility. We prepared glass surfaces by either wet etching or by NLD plasma etching, investigated the surface topography using atomic force microscopy, and attempted to correlate it with EOF generated in the micro-channels of the machined glass. Experiments revealed that the EOF mobility strongly depends on the surface roughness, and therefore upon the fabrication process used. A particularly strong dependency was observed when the surface roughness was on the order of the electric double layer thickness or below. We believe that the correlation described in this paper can be of great help in the design of micro/nano fluidic devices.

  7. Differential search algorithm-based parametric optimization of electrochemical micromachining processes

    Directory of Open Access Journals (Sweden)

    Debkalpa Goswami

    2014-01-01

    Full Text Available Electrochemical micromachining (EMM appears to be a very promising micromachining process for having higher machining rate, better precision and control, reliability, flexibility, environmental acceptability, and capability of machining a wide range of materials. It permits machining of chemically resistant materials, like titanium, copper alloys, super alloys and stainless steel to be used in biomedical, electronic, micro-electromechanical system and nano-electromechanical system applications. Therefore, the optimal use of an EMM process for achieving enhanced machining rate and improved profile accuracy demands selection of its various machining parameters. Various optimization tools, primarily Derringer’s desirability function approach have been employed by the past researchers for deriving the best parametric settings of EMM processes, which inherently lead to sub-optimal or near optimal solutions. In this paper, an attempt is made to apply an almost new optimization tool, i.e. differential search algorithm (DSA for parametric optimization of three EMM processes. A comparative study of optimization performance between DSA, genetic algorithm and desirability function approach proves the wide acceptability of DSA as a global optimization tool.

  8. Development of an electrochemical micromachining instrument for the confined etching techniques

    Science.gov (United States)

    Zhou, Hang; Lai, Lei-Jie; Zhao, Xiang-Hui; Zhu, Li-Min

    2014-04-01

    This study proposes an electrochemical micromachining instrument for two confined etching techniques, namely, confined etchant layer technique (CELT) and electrochemical wet stamping (E-WETS). The proposed instrument consists of a granite bridge base, a Z-axis coarse/fine dual stage, and a force sensor. The Z-axis coarse/fine dual stage controls the vertical movement of the substrate with nanometer accuracy. The force sensor measures the contact force between the mold and the substrate. A contact detection method based on a digital lock-in amplifier is developed to make the mold-substrate contact within a five-nanometer range in CELT, and a force feedback controller is implemented to keep the contact force in E-WETS at a constant value with a noise of less than 0.2 mN. With the use of the confined etching techniques, a microlens array and a curvilinear ridge microstructure are successfully fabricated with high accuracy, thus demonstrating the promising performance of the proposed micromachining instrument.

  9. Characterization of tool-workpiece contact during the micromachining of conductive materials

    Science.gov (United States)

    Castaño, Fernando; Haber, Rodolfo E.; del Toro, Raúl M.

    2017-01-01

    The characterization of dynamic cutting in micro-machining operations is essential for real-time monitoring of tool performance. The analysis of tool-edge/material contact and its electrical resistivity is therefore an interesting avenue of research for monitoring tool-workpiece interaction. This study examines mechanical cutting operations in micromilling operations that remove material to meet the design requirements of conductive parts. It draws from previous research into the theoretical models of cutting mechanisms in milling operations, to present a mathematical characterization of the tool-edge/material contact area. The rationale behind this research is that the contact area between two conductive materials is one of the main factors in determining the magnitude of resistance to the flow of an electric current between both materials. The study also offers a theoretical analysis of tool-edge radial immersion angles on entry and exit and their dynamic behavior. The analysis is mainly centered on cutting operations and cutting-time intervals, where tool-material contact is intermittent. Our theoretical analysis is experimentally corroborated by measuring tool-edge immersion time and tool-edge/material contact time. Promising results are reported that contribute to the development of a technological method for high-precision, real-time monitoring of tool-workpiece interaction and cutting detection in micromachining operations.

  10. Micromachined low-mass RF front-end for beam steering radar

    Science.gov (United States)

    Vahidpour, M.; Moallem, M.; East, J.; Sarabandi, K.

    2012-06-01

    Sensors for autonomous small robotic platforms must be low mass, compact size and low power due to the limited space. For such applications, as the dimensions of the structures shrink, standard machining methods are not suitable because of low fabrication tolerances and high cost in assembly. Commonly, the structures show a high degree of fabrication complexity due to error in alignment, air gaps between conductive parts, poor metal contact, inaccuracy in patterning because of non-contact lithography, complex assemblies of various parts, and high number of steps needed for construction. However, micromachining offers high fabrication precision, provides easy fabrication and integration with active devices and hence is suitable for manufacturing high MMW and submillimeter-wave frequency structures. A radar design compatible with micromachining process is developed to fabricate a Y-band high resolution radar structure with a slot-fed patch array antenna. A multi-step silicon DRIE process is developed for the fabrication of the waveguide structure while the slots are suspended on a thin oxide/nitride/oxide membrane to form the top cover of the waveguide trenches and the patch elements are suspended on a thin Parylene membrane. Gold thermocompression bonding and Parylene bonding are used to assemble different parts of the antenna. These processes result in a compact (4.5 cm × 3.5 cm × 1.5 mm) and light-weight (5 g) radar.

  11. Development of an electrochemical micromachining instrument for the confined etching techniques.

    Science.gov (United States)

    Zhou, Hang; Lai, Lei-Jie; Zhao, Xiang-Hui; Zhu, Li-Min

    2014-04-01

    This study proposes an electrochemical micromachining instrument for two confined etching techniques, namely, confined etchant layer technique (CELT) and electrochemical wet stamping (E-WETS). The proposed instrument consists of a granite bridge base, a Z-axis coarse/fine dual stage, and a force sensor. The Z-axis coarse/fine dual stage controls the vertical movement of the substrate with nanometer accuracy. The force sensor measures the contact force between the mold and the substrate. A contact detection method based on a digital lock-in amplifier is developed to make the mold-substrate contact within a five-nanometer range in CELT, and a force feedback controller is implemented to keep the contact force in E-WETS at a constant value with a noise of less than 0.2 mN. With the use of the confined etching techniques, a microlens array and a curvilinear ridge microstructure are successfully fabricated with high accuracy, thus demonstrating the promising performance of the proposed micromachining instrument.

  12. Picosecond laser micromachining of nitinol and platinum-iridium alloy for coronary stent applications

    Science.gov (United States)

    Muhammad, N.; Whitehead, D.; Boor, A.; Oppenlander, W.; Liu, Z.; Li, L.

    2012-03-01

    The demand for micromachining of coronary stents by means of industrial lasers rises quickly for treating coronary artery diseases, which cause more than one million deaths each year. The most widely used types of laser for stent manufacturing are Nd:YAG laser systems with a wavelength of 1064 nm with pulse lengths of 10-3-10-2 seconds. Considerable post-processing is required to remove heat-affected zones (HAZ), and to improve surface finishes and geometry. Using a third harmonic laser radiation of picosecond laser (6×10-12 s pulse duration) in UV range, the capability of the picosecond laser micromachining of nitinol and platinum-iridium alloy for coronary stent applications are presented. In this study dross-free cut of nitinol and platinum-iridium alloy tubes are demonstrated and topography analysis of the cut surface is carried out. The HAZ characteristics have been investigated by means of microscopic examinations and measurement of micro-hardness distribution near the cut zones.

  13. Micromachined strain gauges for the determination of liquid flow friction coefficients in microchannels

    Science.gov (United States)

    Baviere, R.; Ayela, F.

    2004-02-01

    In this research program, we have performed and tested cupro-nickel (Cu-Ni) strain gauges micromachined on different sorts of silicon nitride (Si3N4) membranes. The design of the gauges obeys an electrical Wheatstone bridge configuration. We have found a good agreement between the expected electromechanical response of the bridge and the experimental signals. The results have displayed sensitivity to static pressure ranging from 50 to 100 µV V-1 bar-1 as a function of the thickness and of the diameter of the membranes. This is part of a study devoted to determining liquid flow friction coefficients in silicon-Pyrex microchannels. Preliminary attempts (Reynolds number up to 300) made using global pressure measurements and with very simple local pressure probes are discussed. Further experiments using Cu-Ni strain gauges are described. Their micromachining, characterization and integration along silicon microchannels are presented. These sensors permitted us to perform the first local and reliable pressure drop measurements in a 7.5 µm deep microchannel. The results are in good agreement with the classical laminar theory for a Reynolds number ranging from 0.2 to 3.

  14. Laser-micromachined and laminated microfluidic components for miniaturized thermal, chemical, and biological systems

    Science.gov (United States)

    Martin, Peter M.; Matson, Dean W.; Bennett, Wendy D.; Stewart, Donald C.; Lin, Yuehe

    1999-03-01

    Microchannel microfluidic components are being developed for heat transfer, chemical reactor, chemical analysis, and biological analytical applications. Specific applications include chemical sensing, DNA replication, blood analysis, capillary electrophoresis, fuel cell reactors, high temperature chemical reactors, heat pumps, combustors, and fuel processors. Two general types of component architectures have been developed and the fabrication processes defined. All involve a lamination scheme using plastic, ceramic, or metal laminates, as opposed to planar components. The first type is a stacked architecture that utilizes functionality built in each layer, with fluid flow interconnects between layers. Each layer of the laminate has specific microchannel geometry, and performs a specific function. Polymeric materials are used primarily. Fabrication processes used are laser micromachining, wet and dry etching, and coating deposition. the laminates can also be micromolded plastics. The second architecture employs laminates to form internal microchannels and interconnects. Materials include ceramic tapes and high temperature metals. Catalysts can be placed in the microchannels. Fabrication processes used are diffusion bonding, ceramic bonding and firing, photochemical etching, and electrochemical micromachining. Bonding, thus sealing, the laminates is an important issue. Process conditions have been develop to reduce distortion of the laminates and to hermetically seal the components.

  15. A Novel Piezo-Actuator-Sensor Micromachine for Mechanical Characterization of Micro-Specimens

    Directory of Open Access Journals (Sweden)

    Leila Ladani

    2010-12-01

    Full Text Available Difficulties associated with testing and characterization of materials at microscale demands for new technologies and devices that are capable of measuring forces and strains at microscale. To address this issue, a novel electroactive-based micro-electro-mechanical machine is designed. The micromachine is comprised of two electroactive (piezoelectric micro-elements mounted on a rigid frame. Electrical activation of one of the elements causes it to expand and induce a stress in the intervening micro-specimen. The response of the microspecimen to the stress is measured by the deformation and thereby voltage/resistance induced in the second electro-active element. The concept is theoretically proven using analytical modeling in conjunction with non-linear, three dimensional finite element analyses for the micromachine. Correlation of the output voltage to the specimen stiffness is shown. It is also demonstrated through finite element and analytical analysis that this technique is capable of detecting non-linear behavior of materials. A characteristic curve for an isotropic specimen exhibiting linear elastic behavior is developed. Application of the proposed device in measuring coefficient of thermal expansion is explored and analytical analysis is conducted.

  16. Noise and mismatch optimization for capacitive MEMS readout

    Energy Technology Data Exchange (ETDEWEB)

    Zhang Chong; Wu Qisong; Yin Tao; Yang Haigang, E-mail: yanghg@mail.ie.ac.c [Institute of Electronics, Chinese Academy of Sciences, Beijing 100190 (China)

    2009-11-15

    This paper presents a high precision CMOS readout circuit for a capacitive MEMS gyroscope. A continuous time topology is employed as well as the chopper noise cancelling technique. A detailed analysis of the noise and mismatch of the capacitive readout circuit is given. The analysis and measurement results have shown that thermal noise dominates in the proposed circuit, and several approaches should be used for both noise and mismatch optimization. The circuit chip operates under a single 5 V supply, and has a measured capacitance resolution of 0.2 aF/sq rootHz. With such a readout circuit, the gyroscope can accurately measure the angular rate with a sensitivity of 15.3 mV/{sup 0}/s. (semiconductor integrated circuits)

  17. Noise and mismatch optimization for capacitive MEMS readout

    Institute of Scientific and Technical Information of China (English)

    Zhang Chong; Wu Qisong; Yin Tao; Yang Haigang

    2009-01-01

    This paper presents a high precision CMOS readout circuit for a capacitive MEMS gyroscope. A continuous time topology is employed as well as the chopper noise cancelling technique. A detailed analysis of the noise and mismatch of the capacitive readout circuit is given. The analysis and measurement results have shown that thermal noise dominates in the proposed circuit, and several approaches should be used for both noise and mismatch optimization. The circuit chip operates under a single 5 V supply, and has a measured capacitance resolution of 0.2 aF/√Hz. With such a readout circuit, the gyroscope can accurately measure the angular rate with a sensitivity of 15.3 mV/°/s.

  18. CMOS capacitive biosensors for highly sensitive biosensing applications.

    Science.gov (United States)

    Chang, An-Yu; Lu, Michael S-C

    2013-01-01

    Magnetic microbeads are widely used in biotechnology and biomedical research for manipulation and detection of cells and biomolecules. Most lab-on-chip systems capable of performing manipulation and detection require external instruments to perform one of the functions, leading to increased size and cost. This work aims at developing an integrated platform to perform these two functions by implementing electromagnetic microcoils and capacitive biosensors on a CMOS (complementary metal oxide semiconductor) chip. Compared to most magnetic-type sensors, our detection method requires no externally applied magnetic fields and the associated fabrication is less complicated. In our experiment, microbeads coated with streptavidin were driven to the sensors located in the center of microcoils with functionalized anti-streptavidin antibody. Detection of a single microbead was successfully demonstrated using a capacitance-to-frequency readout. The average capacitance changes for the experimental and control groups were -5.3 fF and -0.2 fF, respectively.

  19. Extracting Impurity Locations using Scanning Capacitance Microscopy Measurements

    Directory of Open Access Journals (Sweden)

    AGHAEI, S.

    2016-08-01

    Full Text Available In this article we investigate the possibility to use scanning capacitance microscopy (SCM for the 2-D and 3-D "atomistic" dopant profiling of semiconductor materials. For this purpose, we first analyze the effects of random dopant fluctuations (RDF on SCM measurements with nanoscale probes and show that the discrete and random locations of dopant impurities significantly affect the differential capacitance measured in SCM experiments if the dimension of the probe is below 50 nm. Then, we present an algorithm to compute the x, y, and z coordinates of the ionized impurities in the semiconductor material using a set of SCM measurements. The algorithm is based on evaluating the doping sensitivity functions of the differential capacitance and uses a gradient-based iterative method to compute the locations of dopants. Finally, we discuss a standard simulation case and show that we are able to successfully retrieve the locations of the ionized impurities using the proposed algorithm.

  20. A Wearable Capacitive Sensor for Monitoring Human Respiratory Rate

    Science.gov (United States)

    Kundu, Subrata Kumar; Kumagai, Shinya; Sasaki, Minoru

    2013-04-01

    Realizing an untethered, low-cost, and comfortably wearable respiratory rate sensor for long-term breathing monitoring application still remains a challenge. In this paper, a conductive-textile-based wearable respiratory rate sensing technique based on the capacitive sensing approach is proposed. The sensing unit consists of two conductive textile electrodes that can be easily fabricated, laminated, and integrated in garments. Respiration cycle is detected by measuring the capacitance of two electrodes placed on the inner anterior and posterior sides of a T-shirt at either the abdomen or chest position. A convenient wearable respiratory sensor setup with a capacitance-to-voltage converter has been devised. Respiratory rate as well as breathing mode can be accurately identified using the designed sensor. The sensor output provides significant information on respiratory flow. The effectiveness of the proposed system for different breathing patterns has been evaluated by experiments.

  1. Quantum Capacitance Modifies Interionic Interactions in Semiconducting Nanopores

    CERN Document Server

    Lee, Alpha A; Goriely, Alain

    2016-01-01

    Nanopores made with low dimensional semiconducting materials, such as carbon nanotubes and graphene slit pores, are used in supercapacitors. In theories and simulations of their operation, it is often assumed that such pores screen ion-ion interactions like metallic pores, i.e. that screening leads to an exponential decay of the interaction potential with ion separation. By introducing a quantum capacitance that accounts for the density of states in the material, we show that ion-ion interactions in carbon nanotubes and graphene slit pores actually decay algebraically with ion separation. This result suggests a new avenue of capacitance optimization based on tuning the electronic structure of a pore: a marked enhancement in capacitance might be achieved by developing nanopores made with metallic materials or bulk semimetallic materials.

  2. Low Power/Low Voltage Interface Circuitry for Capacitive Sensors

    DEFF Research Database (Denmark)

    Furst, Claus Efdmann

    This thesis focuses mainly on low power/low voltage interface circuits, implemented in CMOS, for capacitive sensors. A brief discussion of demands and possibilities for analog signal processing in the future is presented. Techniques for low power design is presented. This is done by analyzing power...... consumption of different amplifier topologies. Next, low power features of different amplifier types are analyzed on transistor level. A brief comparison of SI circuits for low power applications vs. SC circuits is presented. Methodologies for low voltage design is presented. This is followed by a collection...... power consumption. It is shown that the Sigma-Delta modulator is advantageous when embedded in a feedback loop with a mechanical sensor. Here a micro mechanical capacitive microphone. Feedback and detection circuitry for a capacitive microphone is presented. Practical implementations of low power...

  3. Extraction method for parasitic capacitances and inductances of HEMT models

    Science.gov (United States)

    Zhang, HengShuang; Ma, PeiJun; Lu, Yang; Zhao, BoChao; Zheng, JiaXin; Ma, XiaoHua; Hao, Yue

    2017-03-01

    A new method to extract parasitic capacitances and inductances for high electron-mobility transistors (HEMTs) is proposed in this paper. Compared with the conventional extraction method, the depletion layer is modeled as a physically significant capacitance model and the extrinsic values obtained are much closer to the actual results. In order to simulate the high frequency behaviour with higher precision, series parasitic inductances are introduced into the cold pinch-off model which is used to extract capacitances at low frequency and the reactive elements can be determined simultaneously over the measured frequency range. The values obtained by this method can be used to establish a 16-elements small-signal equivalent circuit model under different bias conditions. The results show good agreements between the simulated and measured scattering parameters up to 30 GHz.

  4. On Machine Capacitance Dimensional and Surface Profile Measurement System

    Science.gov (United States)

    Resnick, Ralph

    1993-01-01

    A program was awarded under the Air Force Machine Tool Sensor Improvements Program Research and Development Announcement to develop and demonstrate the use of a Capacitance Sensor System including Capacitive Non-Contact Analog Probe and a Capacitive Array Dimensional Measurement System to check the dimensions of complex shapes and contours on a machine tool or in an automated inspection cell. The manufacturing of complex shapes and contours and the subsequent verification of those manufactured shapes is fundamental and widespread throughout industry. The critical profile of a gear tooth; the overall shape of a graphite EDM electrode; the contour of a turbine blade in a jet engine; and countless other components in varied applications possess complex shapes that require detailed and complex inspection procedures. Current inspection methods for complex shapes and contours are expensive, time-consuming, and labor intensive.

  5. Last-passage Monte Carlo algorithm for mutual capacitance.

    Science.gov (United States)

    Hwang, Chi-Ok; Given, James A

    2006-08-01

    We develop and test the last-passage diffusion algorithm, a charge-based Monte Carlo algorithm, for the mutual capacitance of a system of conductors. The first-passage algorithm is highly efficient because it is charge based and incorporates importance sampling; it averages over the properties of Brownian paths that initiate outside the conductor and terminate on its surface. However, this algorithm does not seem to generalize to mutual capacitance problems. The last-passage algorithm, in a sense, is the time reversal of the first-passage algorithm; it involves averages over particles that initiate on an absorbing surface, leave that surface, and diffuse away to infinity. To validate this algorithm, we calculate the mutual capacitance matrix of the circular-disk parallel-plate capacitor and compare with the known numerical results. Good agreement is obtained.

  6. Intrinsic Low Hysteresis Touch Mode Capacitive Pressure Sensor

    DEFF Research Database (Denmark)

    Fragiacomo, Giulio; Pedersen, Thomas; Hansen, Ole

    2011-01-01

    Hysteresis has always been one of the main concerns when fabricating touch mode capacitive pressure sensors (TMCPS). This phenomenon can be fought at two different levels: during fabrication or after fabrication with the aid of a dedicated signal conditioning circuit. We will describe a microfabr......Hysteresis has always been one of the main concerns when fabricating touch mode capacitive pressure sensors (TMCPS). This phenomenon can be fought at two different levels: during fabrication or after fabrication with the aid of a dedicated signal conditioning circuit. We will describe...... a microfabrication step that can be introduced in order to reduce drastically the hysteresis of this type of sensors without compromising their sensitivity. Medium-high range (0 to 10 bar absolute pressure) TMCPS with a capacitive signal span of over 100pF and less than 1 % hysteresis in the entire pressure range...

  7. Penicillamine prevents ram sperm agglutination in media that support capacitation.

    Science.gov (United States)

    Leahy, T; Rickard, J P; Aitken, R J; de Graaf, S P

    2016-02-01

    Ram spermatozoa are difficult to capacitate in vitro. Here we describe a further complication, the unreported phenomenon of head-to-head agglutination of ram spermatozoa following dilution in the capacitation medium Tyrodes plus albumin, lactate and pyruvate (TALP). Sperm agglutination is immediate, specific and persistent and is not associated with a loss of motility. Agglutination impedes in vitro sperm handling and analysis. So the objectives of this study were to investigate the cause of sperm agglutination and potential agents which may reduce agglutination. The percentage of non-agglutinated, motile spermatozoa increased when bicarbonate was omitted from complete TALP suggesting that bicarbonate ions stimulate the agglutination process. d-penicillamine (PEN), a nucleophilic thiol, was highly effective at reducing agglutination. The inclusion of 250 μM PEN in TALP reduced the incidence of motile, agglutinated spermatozoa from 76.7 ± 2.7% to 2.8 ± 1.4%. It was then assessed if PEN (1 mM) could be included in existing ram sperm capacitation protocols (TALP +1 mM dibutyryl cAMP, caffeine and theophylline) to produce spermatozoa that were simultaneously capacitated and non-agglutinated. This protocol resulted in a sperm population which displayed high levels of tyrosine phosphorylated proteins and lipid disordered membranes (merocyanine-540) while remaining motile, viable, acrosome-intact and non-agglutinated. In summary, PEN (1 mM) can be included in ram sperm capacitation protocols to reduce sperm agglutination and allow for the in vitro assessment of ram sperm capacitation.

  8. Construction and Operation of a 165K Microcooler with a Sorption Compressor and a Micromachined Cold Stage

    NARCIS (Netherlands)

    Burger, J.F.; Holland, H.J.; Brake, ter H.J.M.; Elwenspoek, M.C.; Rogalla, H.; Ross, R.G. jr

    2003-01-01

    This paper presents the integration and testing of a 165 K microcooler that operates with a sorption compressor and a micromachined cold stage. Attractive features of this combination are the lack of vibration and a long lifetime for a potentially very small cryocooler. The developed cold stage work

  9. Vernier型光子计数探测器阳极电容仿真与试验研究∗%Simulation and exp eriment for electro de capacitance based on Vernier ano de photon counting detector

    Institute of Scientific and Technical Information of China (English)

    邢妍; 陈波; 王海峰; 张宏吉; 何玲平; 金方圆

    2015-01-01

    According to the principle of Vernier anode photon counting detector, in this paper we discuss a decoding algorithm of calculating centroid location and interelectrode capacitance between electrodes, which has a close relationship with preamplifier circuit noise. Based on the Poisson’s equation, the theoretical model of Vernier anode is established. The method of calculating the irregular shape uniplanar self-capacitance and interelectrode capacitance between electrodes using ANSYS finite element analysis is introduced. In addition, a Vernier anode plate is manufactured with picosecond laser micromachining process on a 1.5 mm thick quartz substrate with gold film as conductors. The Vernier anode pattern has a pitch of 9.9 mm, an active area of 19.8 mm × 19.8 mm, insulation channel depth of 10 µm, and insulation channel width of 30 µm. Comparing the simulated capacitances with the measured capacitances, the validity of the three-dimensional finite-element method is proved. A simulation study on the effects of substrate permittivity, insulation channel width and depth on capacitance change is carried out. The simulation result provides a basis for structure design of Vernier anodes.%根据Vernier型光子技术探测器的工作原理,论述了电子云质心解码与阳极面板形成的微小极间电容和电路前端噪声有着密切的关系;根据泊松方程,建立了Vernier阳极的数学模型。利用有限元软件ANSYS计算出同面多电极不规则图形的电容值与极间电容值,解决了如何计算不规则形状电容值的问题;利用皮秒激光器在镀有金膜的石英基底上刻蚀出与仿真参数一致的Vernier型阳极,并测量其电容值。将测量电容值与仿真值进行比较,验证了建立模型的正确性,优化了Vernier阳极的设计参数。

  10. SEMICONDUCTOR DEVICES Multi-bias capacitance voltage characteristic of AlGaN/GaN HEMT

    Science.gov (United States)

    Yan, Pu; Liang, Wang; Tingting, Yuan; Sihua, Ouyang; Lei, Pang; Guoguo, Liu; Weijun, Luo; Xinyu, Liu

    2010-10-01

    The method of multi-bias capacitance voltage measurement is presented. The physical meaning of gate—source and gate—drain capacitances in AlGaN/GaN HEMT and the variations in them with different bias conditions are discussed. A capacitance model is proposed to reflect the behaviors of the gate—source and gate—drain capacitances, which shows a good agreement with the measured capacitances, and the power performance obtains good results compared with the measured data from the capacitance model.

  11. The modelling of a capacitive microsensor for biosensing applications

    Science.gov (United States)

    Bezuidenhout, P. H.; Schoeman, J.; Joubert, T. H.

    2014-06-01

    Microsensing is a leading field in technology due to its wide application potential, not only in bio-engineering, but in other fields as well. Microsensors have potentially low-cost manufacturing processes, while a single device type can have various uses, and this consequently helps with the ever-growing need to provide better health conditions in rural parts of the world. Capacitive biosensors detect a change in permittivity (or dielectric constant) of a biological material, usually within a parallel plate capacitor structure which is often implemented with integrated electrodes of an inert metal such as gold or platinum on a microfluidic substrate typically with high dielectric constant. There exist parasitic capacitance components in these capacitive sensors, which have large influence on the capacitive measurement. Therefore, they should be considered for the development of sensitive and accurate sensing devices. An analytical model of a capacitive sensor device is discussed, which accounts for these parasitic factors. The model is validated with a laboratory device of fixed geometry, consisting of two parallel gold electrodes on an alumina (Al2O3) substrate mounted on a glass microscope slide, and with a windowed cover layer of poly-dimethyl-siloxane (PDMS). The thickness of the gold layer is 1μm and the electrode spacing is 300μm. The alumina substrate has a thickness of 200μm, and the high relative permittivity of 11.5 is expected to be a significantly contributing factor to the total device capacitance. The 155μm thick PDMS layer is also expected to contribute substantially to the total device capacitance since the relative permittivity for PDMS is 2.7. The wideband impedance analyser evaluation of the laboratory device gives a measurement result of 2pF, which coincides with the model results; while the handheld RLC meter readout of 4pF at a frequency of 10kHz is acceptable within the measurement accuracy of the instrument. This validated model will

  12. Flexible Capacitive Electrodes for Minimizing Motion Artifacts in Ambulatory Electrocardiograms

    Directory of Open Access Journals (Sweden)

    Jeong Su Lee

    2014-08-01

    Full Text Available This study proposes the use of flexible capacitive electrodes for reducing motion artifacts in a wearable electrocardiogram (ECG device. The capacitive electrodes have conductive foam on their surface, a shield, an optimal input bias resistor, and guarding feedback. The electrodes are integrated in a chest belt, and the acquired signals are transmitted wirelessly for ambulatory heart rate monitoring. We experimentally validated the electrode performance with subjects standing and walking on a treadmill at speeds of up to 7 km/h. The results confirmed the highly accurate heart rate detection capacity of the developed system and its feasibility for daily-life ECG monitoring.

  13. Analysis of Capacitive Parasitism in PWM Inverter-Fed Motor

    Institute of Scientific and Technical Information of China (English)

    2001-01-01

    The effects of parasitic capacitance in induction motor system are unnoticed when it is fed from the AC line. but they are obvious when supplied directly from a PWM inverter. Consequently. many parasitic problems occur, such as motor-to-earth leakage current, bearing current, incoming line current distortion and uneven distribution of electrical stresses along the winding. On the ba sis of the uniform transmission line principle, a complete equivalent circuit of the PWM inverter-fed motor system is presented, based on which all the capacitive parasitic problems mentioned above are analyzed and simulated by means of PSPICE. All the results are consistent with the existing ones.

  14. An Effective Hybrid Optimization Algorithm for Capacitated Vehicle Routing Problem

    Institute of Scientific and Technical Information of China (English)

    2006-01-01

    Capacitated vehicle routing problem (CVRP) is an important combinatorial optimization problem. However, it is quite difficult to achieve an optimal solution with the traditional optimization methods owing to the high computational complexity. A hybrid algorithm was developed to solve the problem, in which an artificial immune clonal algorithm (AICA) makes use of the global search ability to search the optimal results and simulated annealing (SA) algorithm employs certain probability to avoid becoming trapped in a local optimum. The results obtained from the computational study show that the proposed algorithm is a feasible and effective method for capacitated vehicle routing problem.

  15. Comprehensive measurements of GaAs pixel detectors capacitance

    CERN Document Server

    Caria, M; D'Auria, S; Lai, A; Randaccio, P; Cadeddu, S

    2002-01-01

    We have studied GaAs pixel detectors on semi-insulating wafers with Schottky contacts. We performed comprehensive measurements on the inter-pixel and capacitance to back plane. Being semi-insulating, the behaviour is totally different with respect to other common semiconductors, such as high resistivity silicon. Non-homogeneities are also an issue, due to both the contacts and the crystal bulk. In order to detect them and their influence on capacitance, we undertook systematic measurements with different configurations of the measuring electrodes.

  16. Capacitive Touch User Interface and Implementation with Virtual Refrigerator

    Directory of Open Access Journals (Sweden)

    MIT Academy of Engineering Global Technology and Engineering centre, Whirlpool of India

    2014-05-01

    Full Text Available The proposed User Interface incorporates 14 Touch keys, including slider and wheeler functionality using self capacitance technology, 24 side throw LED with intensity controlled Fade-IN, Fade-OUT effects, Buzzer chime, Voltage regulator circuit, and communication circuitry for the control board. The major advantage that this User Interface is that the entire assembly is less than 10mm thick including PCB, components, light guide and graphics sticker. In this project the mentioned capacitive touch user Interface is interfaced with a Lab view system simulating a virtual refrigerator capable of responding to the commands from the User Interface.

  17. Nickel Oxide/Carbon Nanotubes Nanocomposite for Electrochemical Capacitance

    Institute of Scientific and Technical Information of China (English)

    Kui LIANG; Kayhyeok AN; Younghee LEE

    2005-01-01

    A nanocomposite of nickel oxide/carbon nanotubes was prepared through a simple chemical precipitation followed by thermal annealing. The electrochemical capacitance of this electrode material was studied. When the mass fraction of CNTs (carbon nanotubes) in NiO/CNT composites increases, the electrical resistivity of nanocomposites decreases and becomes similar to that of pure CNTs when it reaches 30%. The specific surface area of composites increases with increasing CNT mass fraction and the specific capacitance reaches 160 F/g under 10 mA/g discharge current density at CNT mass fraction of 10%.

  18. Quantum capacitance in monolayers of silicene and related buckled materials

    Science.gov (United States)

    Nawaz, S.; Tahir, M.

    2016-02-01

    Silicene and related buckled materials are distinct from both the conventional two dimensional electron gas and the famous graphene due to strong spin orbit coupling and the buckled structure. These materials have potential to overcome limitations encountered for graphene, in particular the zero band gap and weak spin orbit coupling. We present a theoretical realization of quantum capacitance which has advantages over the scattering problems of traditional transport measurements. We derive and discuss quantum capacitance as a function of the Fermi energy and temperature taking into account electron-hole puddles through a Gaussian broadening distribution. Our predicted results are very exciting and pave the way for future spintronic and valleytronic devices.

  19. [Impact of sperm capacitation on various populations of human spermatozoa].

    Science.gov (United States)

    Villanueva Díaz, C; Suárez Juárez, M; Díaz, M A; Ayala Ruiz, A

    1989-02-01

    With the purpose of evaluating the impact of spermatic capacitation on different spermatozooa populations, 49 samples of semen, before and after in vitro spermatic capacitation with Ham F-10 medium, were studied; motility of cells was evaluated according to WHO criteria. There was diminution of percentage of immobile cells, 27.8 to 20.0, as well as increase in population of cells with more mobility, 28.6% to 39.1%. Both difference were statistically significant (p = less than 0.05 and p = less than 0.005, respectively). These data suggest that spermatic capacitacion activates "in cascade" all groups of gametes.

  20. Stray capacitances in the watt balance operation: electrostatic forces

    DEFF Research Database (Denmark)

    Quagliotti, Danilo; Mana, G.

    2014-01-01

    In a watt balance, stray capacitances exist between the coil and the magnet. Since the electric current flowing in the coil creates a difference in electric potentials between the coil and magnet, their electrostatic interactions must be taken into account. This paper reports the results of a fin......In a watt balance, stray capacitances exist between the coil and the magnet. Since the electric current flowing in the coil creates a difference in electric potentials between the coil and magnet, their electrostatic interactions must be taken into account. This paper reports the results...

  1. Broadband, High-Temperature Ultrasonic Transducer

    Science.gov (United States)

    Parker, F. Raymond; Winfree, William P.; Barrows, Danny A.

    1995-01-01

    Materials chosen for endurance at high temperatures and acoustic coupling and damping. Acoustic transducer designed to exhibit broad frequency response and to survive temperatures close to melting points of brazing alloys. Attached directly and continuously to hot object monitored ultrasonically: for example, it can be attached to relatively cool spot on workpiece during brazing for taking ultrasonic quality-control measurements.

  2. Backward ray tracing for ultrasonic imaging

    NARCIS (Netherlands)

    Breeuwer, R.

    1990-01-01

    Focused ultrasonic beams frequently pass one or more media interfaces, strongly affecting the ultrasonic beamshape and focusing. A computer program, based on backward ray tracing was developed to compute the shape of a corrected focusing mirror. This shape is verified with another program; then the

  3. 21 CFR 870.2880 - Ultrasonic transducer.

    Science.gov (United States)

    2010-04-01

    ... structures. This device includes phased arrays and two-dimensional scanning transducers. (b) Classification... 21 Food and Drugs 8 2010-04-01 2010-04-01 false Ultrasonic transducer. 870.2880 Section 870.2880...) MEDICAL DEVICES CARDIOVASCULAR DEVICES Cardiovascular Monitoring Devices § 870.2880 Ultrasonic...

  4. Ultrasonic fingerprinting by phased array transducer

    Science.gov (United States)

    Sednev, D.; Kataeva, O.; Abramets, V.; Pushenko, P.; Tverdokhlebova, T.

    2016-06-01

    Increasing quantity of spent nuclear fuel that must be under national and international control requires a novel approach to safeguard techniques and equipment. One of the proposed approaches is utilize intrinsic features of casks with spent fuel. In this article an application of a phased array ultrasonic method is considered. This study describes an experimental results on ultrasonic fingerprinting of austenitic steel seam weld.

  5. Ultrasonic fingerprinting by phased array transducer

    OpenAIRE

    Sednev, Dmitry Andreevich; Kataeva, O.; Abramets, V.; Pushenko, P.; Tverdokhlebova, T.

    2016-01-01

    Increasing quantity of spent nuclear fuel that must be under national and international control requires a novel approach to safeguard techniques and equipment. One of the proposed approaches is utilize intrinsic features of casks with spent fuel. In this article an application of a phased array ultrasonic method is considered. This study describes an experimental results on ultrasonic fingerprinting of austenitic steel seam weld.

  6. Feasibility of transparent flexible ultrasonic haptic actuator

    Science.gov (United States)

    Akther, Asma; Kafy, Abdullahil; Kim, Hyun Chan; Kim, Jaehwan

    2016-04-01

    Ultrasonic haptics actuator is a device that can create a haptic feedback to user's hand. The modulation of ultrasonic frequency can give different textures to the users. In this study, a feasibility of the ultrasonic haptic actuator made on a flexible piezoelectric substrate is investigated. As the piezoelectric substrate helps to propagate flexural waves, a pair of interdigital transducer (IDT) with reflectors can produce standing waves, which can increase the vibrational displacement of the actuator. A pair of IDT pattern was fabricated on a piezoelectric polymer substrate. A finite element analysis is at first performed to design the actuator. A sinusoidal excitation voltage is applied on IDT electrodes at ultrasonic frequencies and the displacement waveforms are found. The displacement waveforms clearly represent how ultrasonic waves propagate through the piezoelectric substrate.

  7. Ultrasonic vocalizations emitted by flying squirrels.

    Directory of Open Access Journals (Sweden)

    Meghan N Murrant

    Full Text Available Anecdotal reports of ultrasound use by flying squirrels have existed for decades, yet there has been little detailed analysis of their vocalizations. Here we demonstrate that two species of flying squirrel emit ultrasonic vocalizations. We recorded vocalizations from northern (Glaucomys sabrinus and southern (G. volans flying squirrels calling in both the laboratory and at a field site in central Ontario, Canada. We demonstrate that flying squirrels produce ultrasonic emissions through recorded bursts of broadband noise and time-frequency structured frequency modulated (FM vocalizations, some of which were purely ultrasonic. Squirrels emitted three types of ultrasonic calls in laboratory recordings and one type in the field. The variety of signals that were recorded suggest that flying squirrels may use ultrasonic vocalizations to transfer information. Thus, vocalizations may be an important, although still poorly understood, aspect of flying squirrel social biology.

  8. Ultrasonic assessment of oil quality during frying.

    Science.gov (United States)

    Benedito, Jose; Mulet, Antonio; Velasco, J; Dobarganes, M Carmen

    2002-07-31

    In this paper, changes in ultrasonic properties during thermoxidation of virgin olive oil were studied. Samples of virgin olive oil were heated over different periods of time from 2 to 16 h at 200 degrees C. Oil degradation was characterized by means of physical and chemical changes, i.e., viscosity, color, polar compounds, polymers, and polar fatty acids. Ultrasonic measurements were carried out while the oil sample was cooled from 35 to 25 degrees C. It was found that velocity and attenuation measurements were related to viscosity measurements through a classical equation for viscous liquids. The ultrasonic measurements were also related to the percentages of polar compounds and polymers, which shows the feasibility of using ultrasonic properties to monitor oil quality. Nevertheless, as long as the ultrasonic measurements are temperature dependent, this variable must be controlled in order to obtain repetitive and reliable measurements.

  9. A Micro-Machined Microphone Based on a Combination of Electret and Field-Effect Transistor.

    Science.gov (United States)

    Shin, Kumjae; Jeon, Junsik; West, James Edward; Moon, Wonkyu

    2015-08-18

    Capacitive-type transduction is now widely used in MEMS microphones. However, its sensitivity decreases with reducing size, due to decreasing air gap capacitance. In the present study, we proposed and developed the Electret Gate of Field Effect Transistor (ElGoFET) transduction based on an electret and FET (field-effect-transistor) as a novel mechanism of MEMS microphone transduction. The ElGoFET transduction has the advantage that the sensitivity is dependent on the ratio of capacitance components in the transduction structure. Hence, ElGoFET transduction has high sensitivity even with a smaller air gap capacitance, due to a miniaturization of the transducer. A FET with a floating-gate electrode embedded on a membrane was designed and fabricated and an electret was fabricated by ion implantation with Ga(+) ions. During the assembly process between the FET and the electret, the operating point of the FET was characterized using the static response of the FET induced by the electric field due to the trapped positive charge at the electret. Additionally, we evaluated the microphone performance of the ElGoFET by measuring the acoustic response in air using a semi-anechoic room. The results confirmed that the proposed transduction mechanism has potential for microphone applications.

  10. RF-MEMS capacitive switches with high reliability

    Science.gov (United States)

    Goldsmith, Charles L.; Auciello, Orlando H.; Carlisle, John A.; Sampath, Suresh; Sumant, Anirudha V.; Carpick, Robert W.; Hwang, James; Mancini, Derrick C.; Gudeman, Chris

    2013-09-03

    A reliable long life RF-MEMS capacitive switch is provided with a dielectric layer comprising a "fast discharge diamond dielectric layer" and enabling rapid switch recovery, dielectric layer charging and discharging that is efficient and effective to enable RF-MEMS switch operation to greater than or equal to 100 billion cycles.

  11. Capacitive sensor probe to assess frying oil degradation

    Directory of Open Access Journals (Sweden)

    Alfadhl Yahya Khaled

    2015-09-01

    Full Text Available The repeated usage of frying oil has been proven hazardous due to the degradation process by chemical reactions that lead to changes in the quality of the oil. Currently, the degree of frying oil degradation is indicated by the percentage of its total polar compounds (TPC. In this study, a capacitive sensor was designed to assess frying oil degradation at several heating time intervals by measuring changes on its electrical capacitance. The sensor was designed using interdigitated electrode structure. A total of 30 samples of 130 ml palm oil were heated at 180 °C up to 30 h. For each one hour interval, one sample was moved out from the laboratory oven. The electrical capacitance, total polar compound (TPC and viscosity of the samples were measured for analysis. Preliminary results demonstrated significant correlation between oil electrical capacitance with TPC and viscosity with R2 ranged from 0.83 to 0.90. The designed sensor has good potential for simple and inexpensive way of determining frying oil quality.

  12. Dynamic Adsorption/Desorption Process Model of Capacitive Deionization

    NARCIS (Netherlands)

    Biesheuvel, P.M.; Limpt, van B.; Wal, van der A.

    2009-01-01

    In capacitive deionization (CDI), an electrical potential difference is applied across oppositely placed electrodes, resulting in the adsorption of ions from aqueous solution and a partially ion-depleted product stream. CDI is a dynamic process which operates in a sequential mode; i.e., after a cert

  13. Stray capacitances in the watt balance operation: electrostatic forces

    CERN Document Server

    Quagliotti, Danilo

    2014-01-01

    In a watt balance, stray capacitances exist between the coil and the magnet. Since the electric current flowing in the coil originates a difference between the coil and magnet electric-potentials, their electrostatic interactions must be taken into account. This paper reports the results of a finite element analysis of the forces acting on the coil.

  14. Capacitive technology for energy extraction from chemical potential differences

    NARCIS (Netherlands)

    Bastos Sales, B.

    2013-01-01

    This thesis introduces the principle of Capacitive energy extraction based on Donnan Potential (CDP) to exploit salinity gradients. It also shows the fundamental characterization and improvements of CDP. An alternative application of this technology aimed at thermal gradients was tested.  

  15. A Multifunction Low-Power Preamplifier for MEMS Capacitive Microphones

    DEFF Research Database (Denmark)

    Jawed, Syed Arsalan; Nielsen, Jannik Hammel; Gottardi, Massimo;

    2009-01-01

    A multi-function two-stage chopper-stabilized preamplifier (PAMP) for MEMS capacitive microphones (MCM) is presented. The PAMP integrates digitally controllable gain, high-pass filtering and offset control, adding flexibility to the front-end readout of MCMs. The first stage of the PAMP consists...

  16. Multilevel inverter based class D audio amplifier for capacitive transducers

    DEFF Research Database (Denmark)

    Nielsen, Dennis; Knott, Arnold; Andersen, Michael A. E.

    2014-01-01

    The reduced semiconductor voltage stress makes the multilevel inverters especially interesting, when driving capacitive transducers for audio applications. A ± 300 V flying capacitor class D audio amplifier driving a 100 nF load in the midrange region of 0.1-3.5 kHz with Total Harmonic Distortion...

  17. Energy consumption and constant current operation in membrane capacitive deionization

    NARCIS (Netherlands)

    Zhao, R.; Biesheuvel, P.M.; Wal, van der A.F.

    2012-01-01

    Membrane capacitive deionization (MCDI) is a water desalination technology based on applying a cell voltage between two oppositely placed porous electrodes sandwiching a spacer channel that transports the water to be desalinated. In the salt removal step, ions are adsorbed at the carbon–water interf

  18. Waterproof, Ultrahigh Areal-Capacitance, Wearable Supercapacitor Fabrics.

    Science.gov (United States)

    Yang, Yu; Huang, Qiyao; Niu, Liyong; Wang, Dongrui; Yan, Casey; She, Yiyi; Zheng, Zijian

    2017-02-24

    High-performance supercapacitors (SCs) are promising energy storage devices to meet the pressing demand for future wearable applications. Because the surface area of a human body is limited to 2 m(2) , the key challenge in this field is how to realize a high areal capacitance for SCs, while achieving rapid charging, good capacitive retention, flexibility, and waterproofing. To address this challenge, low-cost materials are used including multiwall carbon nanotube (MWCNT), reduced graphene oxide (RGO), and metallic textiles to fabricate composite fabric electrodes, in which MWCNT and RGO are alternatively vacuum-filtrated directly onto Ni-coated cotton fabrics. The composite fabric electrodes display typical electrical double layer capacitor behavior, and reach an ultrahigh areal capacitance up to 6.2 F cm(-2) at a high areal current density of 20 mA cm(-2) . All-solid-state fabric-type SC devices made with the composite fabric electrodes and water-repellent treatment can reach record-breaking performance of 2.7 F cm(-2) at 20 mA cm(-2) at the first charge-discharge cycle, 3.2 F cm(-2) after 10 000 charge-discharge cycles, zero capacitive decay after 10 000 bending tests, and 10 h continuous underwater operation. The SC devices are easy to assemble into tandem structures and integrate into garments by simple sewing.

  19. Capacitive pressure sensor in post-processing on LTCC substrates

    NARCIS (Netherlands)

    Meijerink, M.G.H.; Nieuwkoop, E.; Veninga, E.P.; Meuwissen, M.H.H.; Tijdink, M.W.W.J.

    2005-01-01

    A capacitive pressure sensor was realized by means of a post-processing step on a low temperature co-fired ceramics (LTCC) substrate. The new sensor fabrication technology allows for integration of the sensor with interface circuitry and possibly also wireless transmission circuits on LTCC substrate

  20. A Micro Dynamically Tuned Gyroscope with Adjustable Static Capacitance

    Directory of Open Access Journals (Sweden)

    Lun Kong

    2013-02-01

    Full Text Available This paper presents a novel micro dynamically tuned gyroscope (MDTG with adjustable static capacitance. First, the principle of MDTG is theoretically analyzed. Next, some simulations under the optimized structure parameters are given as a reference for the mask design of the rotor wafer and electrode plates. As two key components, the process flows of the rotor wafer and electrode plates are described in detail. All the scanning electron microscopy (SEM photos show that the fabrication process is effective and optimized. Then, an assembly model is designed for the static capacitance adjustable MDTG, whose static capacitance can be changed by rotating the lower electrode plate support and substituting gasket rings of different thicknesses. Thus, the scale factor is easily changeable. Afterwards, the digitalized closed-loop measurement circuit is simulated. The discrete correction and decoupling modules are designed to make the closed-loop stable and cross-coupling effect small. The dual axis closed-loop system bandwidths can reach more than 60 Hz and the dual axis scale factors are completely symmetrical. All the simulation results demonstrate the proposed fabrication of the MDTG can meet the application requirements. Finally, the paper presents the test results of static and dynamic capacitance values which are consistent with the simulation values.