WorldWideScience

Sample records for surface micromachining technology

  1. Multi-layer enhancement to polysilicon surface-micromachining technology

    Energy Technology Data Exchange (ETDEWEB)

    Sniegowski, J.J.; Rodgers, M.S. [Sandia National Labs., Albuquerque, NM (United States). Intelligent Micromachine Dept.

    1997-10-01

    A multi-level polysilicon surface-micromachining technology consisting of 5 layers of polysilicon is presented. Surface topography and film mechanical stress are the major impediments encountered in the development of a multilayer surface-micromachining process. However, excellent mechanical film characteristics have been obtained through the use of chemical-mechanical polishing for planarization of topography and by proper sequencing of film deposition with thermal anneals. Examples of operating microactuators, geared power-transfer mechanisms, and optical elements demonstrate the mechanical advantages of construction with 5 polysilicon layers.

  2. Manufacturing microsystems-on-a-chip with 5-level surface micromachining technology

    Energy Technology Data Exchange (ETDEWEB)

    Sniegowski, J.; Rodgers, M.S.

    1998-05-01

    An agile microsystem manufacturing technology has been developed that provides unprecedented 5 levels of independent polysilicon surface-micromachine films for the designer. Typical surface-micromachining processes offer a maximum of 3 levels, making this the most complex surface-micromachining process technology developed to date. Leveraged from the extensive infrastructure present in the microelectronics industry, the manufacturing method of polysilicon surface-micromachining offers similar advantages of high-volume, high-reliability, and batch-fabrication to microelectromechanical systems (MEMS) as has been accomplished with integrated circuits (ICs). These systems, comprised of microscopic-sized mechanical elements, are laying the foundation for a rapidly expanding, multi-billion dollar industry 2 which impacts the automotive, consumer product, and medical industries to name only a few.

  3. Macrodesign for microdevices: Polysilicon surface-micromachining technology, applications and issues

    Energy Technology Data Exchange (ETDEWEB)

    Sniegowski, J.J. [Sandia National Labs., Albuquerque, NM (United States). Intelligent Micromachine Dept.

    1997-05-01

    The intent of this tutorial is to overview the technology of multi-level polysilicon surface micromachining, to present examples of devices which fully utilize this level of complexity, and to discuss what they believe to be significant issues which are not fully resolved. Following this intent, the tutorial consists of four sections. The first is an introduction and description of multi-level polysilicon surface micromachining and its potential benefits. Specifically, the inclusion of a third deposited layer of mechanical polysilicon greatly extends the degree of complexity available for micromechanism design. The second section introduces wafer planarization by CMP as a process tool for surface micromachining. The third section presents examples of actuated geared micromechanisms which require the multi-level fabrication process. Demonstration of actuation mechanisms coupled to external devices are illustrated. Finally, polysilicon surface micromachining fabrication technology has reached a level where many device designs, for the most part, can be embodied in the technology to produce a mechanical construct which provides the desired function. When designed properly, the fabricated mechanical element, if free to operate, will produce the desired function. However, one set of issues which can hinder or prevent operation are related to the post-fabricated device surfaces. These surface issues; namely, stiction, friction, and wear, are emphasized in the final section as a major hindrance to realizing the full potential of surface micromachined devices.

  4. A manufacturing method for multi-layer polysilicon surface-micromachining technology

    Energy Technology Data Exchange (ETDEWEB)

    Sniegowski, J.J.; Rodgers, M.S.

    1998-01-01

    An advanced manufacturing technology which provides multi-layered polysilicon surface micromachining technology for advanced weapon systems is presented. Specifically, the addition of another design layer to a 4 levels process to create a 5 levels process allows consideration of fundamentally new architecture in designs for weapon advanced surety components.

  5. The Development of Micromachined Gyroscope Structure and Circuitry Technology

    OpenAIRE

    Dunzhu Xia; Cheng Yu; Lun Kong

    2014-01-01

    This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs), piezoelectric vibrating gyroscopes (PVGs), surface acoustic wave (SAW) gyroscopes, bulk acoustic wave (BAW) gyroscopes, micromachined electrostati...

  6. Stiction in surface micromachining

    NARCIS (Netherlands)

    Tas, Niels Roelof; Sonnenberg, A.H.; Jansen, Henricus V.; Legtenberg, R.; Legtenberg, Rob; Elwenspoek, Michael Curt

    1996-01-01

    Due to the smoothness of the surfaces in surface micromachining, large adhesion forces between fabricated structures and the substrate are encountered. Four major adhesion mechanisms have been analysed: capillary forces, hydrogen bridging, electrostatic forces and van der Waals forces. Once contact

  7. PECVD silicon carbide surface micromachining technology and selected MEMS applications

    NARCIS (Netherlands)

    Rajaraman, V.; Pakula, L.S.; Yang, H.; French, P.J.; Sarro, P.M.

    2011-01-01

    Attractive material properties of plasma enhanced chemical vapour deposited (PECVD) silicon carbide (SiC) when combined with CMOS-compatible low thermal budget processing provides an ideal technology platform for developing various microelectromechanical systems (MEMS) devices and merging them with

  8. Tribological issues of polysilicon surface-micromachining

    Energy Technology Data Exchange (ETDEWEB)

    Sniegowski, J.J.

    1997-12-01

    Polysilicon surface-micromachining is a Micro-Electro-Mechanical Systems (MEMS) manufacturing technology where the infrastructure for manufacturing silicon integrated circuits is used to fabricate micro-miniature mechanical devices. This presentation describes a multi-level mechanical polysilicon surface-micromachining technology and includes a discussion of the issues which affect device manufacture and performance. The multi-level technology was developed and is employed primarily to fabricate microactuated mechanisms. The intricate and complex motion offered by these devices is naturally accompanied by various forms of fraction and wear in addition to the classical stiction phenomena associated with micromechanical device fabrication and usage.

  9. The development of micromachined gyroscope structure and circuitry technology.

    Science.gov (United States)

    Xia, Dunzhu; Yu, Cheng; Kong, Lun

    2014-01-14

    This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs), piezoelectric vibrating gyroscopes (PVGs), surface acoustic wave (SAW) gyroscopes, bulk acoustic wave (BAW) gyroscopes, micromachined electrostatically suspended gyroscopes (MESGs), magnetically suspended gyroscopes (MSGs), micro fiber optic gyroscopes (MFOGs), micro fluid gyroscopes (MFGs), micro atom gyroscopes (MAGs), and special micromachined gyroscopes. Next, the control electronics of micromachined gyroscopes are analyzed. The control circuits are categorized into typical circuitry and special circuitry technologies. The typical circuitry technologies include typical analog circuitry and digital circuitry, while the special circuitry consists of sigma delta, mode matching, temperature/quadrature compensation and novel special technologies. Finally, the characteristics of various typical gyroscopes and their development tendency are discussed and investigated in detail.

  10. The Development of Micromachined Gyroscope Structure and Circuitry Technology

    Directory of Open Access Journals (Sweden)

    Dunzhu Xia

    2014-01-01

    Full Text Available This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs, piezoelectric vibrating gyroscopes (PVGs, surface acoustic wave (SAW gyroscopes, bulk acoustic wave (BAW gyroscopes, micromachined electrostatically suspended gyroscopes (MESGs, magnetically suspended gyroscopes (MSGs, micro fiber optic gyroscopes (MFOGs, micro fluid gyroscopes (MFGs, micro atom gyroscopes (MAGs, and special micromachined gyroscopes. Next, the control electronics of micromachined gyroscopes are analyzed. The control circuits are categorized into typical circuitry and special circuitry technologies. The typical circuitry technologies include typical analog circuitry and digital circuitry, while the special circuitry consists of sigma delta, mode matching, temperature/quadrature compensation and novel special technologies. Finally, the characteristics of various typical gyroscopes and their development tendency are discussed and investigated in detail.

  11. Enhancing cavitation with micromachined surfaces

    Science.gov (United States)

    Fernandez Rivas, David; Stricker, Laura; Zijlstra, Aaldert G.; Gardeniers, Han; Lohse, Detlef; Prosperetti, Andrea; Mesoscale Chemical System Group Collaboration; Physics of Fluids Group Collaboration; Department of Mechanical Engineering Collaboration

    2012-11-01

    When a silicon surface with micromachined pits submerged in a liquid is exposed to continuous ultrasound at 200 kHz, bubbles are ejected from the air filled cavities. Depending on the pressure amplitude different scenarios are observed, as the bubbles ejected from the micropits interact in complex ways with each other, and with the silicon surface. We have determined the size distribution of bubbles ejected from one, two and three pits for three different electrical power settings, and correlated them with sonochemical OH* radical production. Numerical simulations of the sonochemical conversion reaction rates were obtained using the empirical bubble size distributions and are compared with experimental results. Experimental evidence of shock wave emission from the microbubble clusters, deformed microbubble shapes, jetting and surface erosion are also presented. Financially supported through the project 07391 of the Technology Foundation STW, The Netherlands.

  12. Integrated mold/surface-micromachining process

    Energy Technology Data Exchange (ETDEWEB)

    Barron, C.C.; Fleming, J.G.; Montague, S.; Sniegowski, J.J.; Hetherington, D.L.

    1996-03-01

    We detail a new monolithically integrated silicon mold/surface-micromachining process which makes possible the fabrication of stiff, high-aspect-ratio micromachined structures integrated with finely detailed, compliant structures. An important example, which we use here as our process demonstration vehicle, is that of an accelerometer with a large proof mass and compliant suspension. The proof mass is formed by etching a mold into the silicon substrate, lining the mold with oxide, filling it with mechanical polysilicon, and then planarizing back to the level of the substrate. The resulting molded structure is recessed into the substrate, forming a planar surface ideal for subsequent processing. We then add surface-micromachined springs and sense contacts. The principal advantage of this new monolithically integrated mold/surface-micromachining process is that it decouples the design of the different sections of the device: In the case of a sensitive accelerometer, it allows us to optimize independently the proof mass, which needs to be as large, stiff, and heavy as possible, and the suspension, which needs to be as delicate and compliant as possible. The fact that the high-aspect-ratio section of the device is embedded in the substrate enables the monolithic integration of high-aspect-ratio parts with surface-micromachined mechanical parts, and, in the future, also electronics. We anticipate that such an integrated mold/surface micromachining/electronics process will offer versatile high-aspect-ratio micromachined structures that can be batch-fabricated and monolithically integrated into complex microelectromechanical systems.

  13. The integration of surface micromachined devices with optoelectronics: Technology and applications

    Energy Technology Data Exchange (ETDEWEB)

    Warren, M.E.; Blum, O.; Sullivan, C.T.; Shul, R.J.; Rodgers, M.S.; Sniegowski, J.J.

    1998-04-01

    Sandia National Laboratories has a substantial effort in development of microelectromechanical system (MEMS) technologies. This miniaturization capability can lead to low-cost, small, high-performance systems-on-a-chip, and have many applications ranging from advanced military systems to large-volume commercial markets like automobiles, rf or land-based communications networks and equipment, or commercial electronics. One of the key challenges in realization of the microsystem is integration of several technologies including digital electronics; analog and rf electronics, optoelectronics, sensors and actuators, and advanced packaging technologies. In this work they describe efforts in integrating MEMS and optoelectronic or photonic functions and the fabrication constraints on both system components. the MEMS technology used in this work are silicon surface-machined systems fabricated using the SUMMiT (Sandia Ultraplanar Multilevel MEMS Technology) process developed at Sandia. This process includes chemical-mechanical polishing as an intermediate planarization step to allow the use of 4 or 5 levels of polysilicon.

  14. Condensation of sodium on a micromachined surface for AMTEC

    International Nuclear Information System (INIS)

    Crowley, C.J.; Izenson, M.G.

    1993-01-01

    A novel condenser component is being developed to enable Alkali Metal Thermal to Electric Conversion (AMTEC) technology to achieve two critical goals: (1) optimization of conversion efficiency and (2) microgravity fluid management. The first goal is achieved by minimizing parasitic radiation heat transfer losses for condensers with a large view factor to the high-temperature β double-prime-alumina surface. The condenser geometry includes a specially designed, micromachined surface where large capillary forces are used to manage the fluid distribution to accomplish the second goal. We present and discuss the results of separate effects experiments investigating the wetting and condensation behavior of sodium on this capillary surface. Test results show that the micromachined surface maintains a smooth, high reflective film of liquid sodium on the surface, which implies reduced parasitic losses and increased conversion efficiencies in AMTEC cells. Accomplishing this in an adverse gravity gradient demonstrates the potential for management of the fluid even under spacecraft acceleration conditions

  15. Design of Surface Micromachined Compliant MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Bradley, Joe Anthony [Iowa State Univ., Ames, IA (United States)

    2002-12-31

    The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a micro-compliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMs, most have used comb-drive actuation methods and bulk micromachining processes. This research focused on fully-compliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms.

  16. Design of Surface micromachined Compliant MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Bradley, Joe Anthony [Iowa State Univ., Ames, IA (United States)

    2001-01-01

    The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a micro-compliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMS, most have used comb-drive actuation methods and bulk micromachining processes. This research focuses on fully-compliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms.

  17. Advanced technology trend survey of micromachines in Europe; Oshu ni okeru micromachine sentan gijutsu doko chosa

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1996-02-01

    In this research survey, the development trend of micromachine technology in Europe was surveyed, development level of micromachine technology of European companies was grasped, and practical application fields of their target were investigated. Technology development level of private companies in Japan`s national projects and practical application fields of Japan`s target were arranged. Trends of micromachine technology development are compared between Japanese companies and European companies. Among micromachine technology development projects in Europe, ``8520 MUST`` is a part of the ESPRIT Project. About 40,000 companies among about 170,000 companies in whole Europe are relating to the MUST Project. The main fields include the manufacturing technology, process control of machines, technology of safety, sensor technology in environmental fields, and automotive technology. The marketing fields of application include the automobile, military technology, home automation, industrial process, medical technology, environmental technology, and games. The results can be compared with the direction of research and development in Japan. 22 figs., 8 tabs.

  18. Surface Micromachined Arrays of Transition-Edge Detectors, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — An innovative surface micromachining technique is described for the fabrication of closely-packed arrays of transition edge sensor (TES) x-ray microcalorimeters....

  19. Thermal simulation of surface micromachined polysilicon hot plates of low power consumption

    NARCIS (Netherlands)

    Dumitrescu, Marius; Cobianu, Cornel; Lungu, Dan; Pascu, Adrian; Kolev, Spas; van den Berg, Albert

    1999-01-01

    A simple, IC compatible, surface micromachined polysilicon membrane was technologically designed and thermally simulated by 3D finite element ‘COSMOS' program in order to investigate its capability to work as a micro hot plate for a gas sensing test structure of low power consumption. For an

  20. Optofluidic Microlasers based on Femtosecond Micromachining Technology

    Directory of Open Access Journals (Sweden)

    Simoni F.

    2017-08-01

    Full Text Available We present the different optofluidic lasers which have been realized using the Femtosecond Micromachining technique to fabricate the monolithic optofluidic structures in glass chips. We show how the great flexibility of this 3D technique allows getting different kind of optical cavities. The most recent devices fabricated by this technique as ring shaped and Fabry-Perot resonators show excellent emission performances.We also point out how the addition of the inkjet printing technique provides further opportunities in realizing optofluidic chips.

  1. Technology trends in high temperature pressure transducers: The impact of micromachining

    Science.gov (United States)

    Mallon, Joseph R., Jr.

    1992-01-01

    This paper discusses the implications of micromachining technology on the development of high temperature pressure transducers. The introduction puts forth the thesis that micromachining will be the technology of choice for the next generation of extended temperature range pressure transducers. The term micromachining is defined, the technology is discussed and examples are presented. Several technologies for high temperature pressure transducers are discussed, including silicon on insulator, capacitive, optical, and vibrating element. Specific conclusions are presented along with recommendations for development of the technology.

  2. Bionics: prcise color tuning by interference in nature and technology-applications in surface-micromachined 1.55μm vertical air-cavity filters

    Science.gov (United States)

    Hillmer, Hartmut; Daleiden, Juergen; Prott, Cornelia; Irmer, Soeren; Roemer, Friedhard; Ataro, Edwin; Tarraf, Amer; Ruehling, H.; Maniak, Markus; Strassner, Martin

    2003-01-01

    Bionics transfers the principles of success of nature into natural science, engineering disciplines and applications. Often generation and detection of different spectral colors play key roles in communication in both, nature and technology. The latter one refers e.g. to dense wavelength division multiplex optical communication systems. This paper shows interesting parallels in tunable spectral light filtering by butterfly wings and by tunable optical filters used in optical communication systems. In both cases light interferes constructively and destructively with nano- and microstructures of appropriate shape, dimensions and materials. In this paper methodology is strongly emphasized. We demonstrate that tailored scaling allows the effectiveness of physical effects to be enhanced in nature and technology. These principles are rigorously applied in micromachined 1.55μm vertical-resonator-based filters, capable of wide, continuous, monotonic and kink-free tuning by a single control parameter. Tuning is achieved by mechanically actuating one or several membranes embedded by air-gaps in a vertical resonator including two ultra-highly reflective DBR mirrors. The layers of mirrors reveal a very strong refractive index contrast. Filters including InP/air-gap DBR's (3.5 periods) using GaInAs sacrificial layers reveal a continuous tuning of >9% of the absolute wavelength. Varying a reverse voltage (U=0 .. -3.2V) between the membranes, a tuning range up to 142nm was obtained due to electrostatic actuation. Appropriate miniaturization is shown to increase the mechanical stability and the effectiveness of spectral tuning by electrostatic actuation since the relative significance of the fundamental physical forces can be shifted considerably by appropriate scaling.

  3. Development of a Surface Micromachined On-Chip Flat Disk Micropump

    Directory of Open Access Journals (Sweden)

    M. I. KILANI

    2009-08-01

    Full Text Available The paper presents research progress in the development of a surface micromachined flat disk micropump which employs the viscous and centrifugal effects acting on a layer of fluid sandwiched between a rotating flat disk and a stationary plate. The pump is fabricated monolithically on-chip using Sandia’s Ultraplanar Multilevel MEMS Technology (SUMMiT™ where an electrostatic comb-drive Torsional Ratcheting Actuator (TRA drives the flat disk through a geared transmission. The paper reviews available analytical models for flow geometries similar to that of the described pump, and presents a set of experiments which depict its performance and possible failure modes. Those experiments highlight future research directions in the development of electrostatically-actuated, CMOS-compatible, surface micromachined pumps.

  4. Micromachined Systems-on-a-Chip: Infrastructure, Technology and Applications

    Energy Technology Data Exchange (ETDEWEB)

    Allen, J. J.; Krygowski, T. W.; Miller, S. L.; Montague, S.; Rodgers, M. S.; Schriner, H.; Smith, J. H.; Sniegowski, J. J.

    1998-10-09

    A review is made of the infrastructure, technology and capabilities of Sandia National Laboratories for the development of micromechanical systems that have potential space applications. By incorporating advanced fabrication processes, such as chemical mechanical polishing, and several mechanical polysilicon levels, the range' of rrticromechanical systems that can be fabricated in these technologies is virtually limitless. Representative applications include a micro- engine driven mirror, and a micromachined lock. Using a novel integrated MEM!YCMOS technology, a six degree-of-freedom accelerometer/gyroscope system has been designed by researchers at U.C. Berkeley and fabricated on the same silicon chip as the CMOS control circuits to produce an integrated micro-navigational unit.

  5. Surface micromachined counter-meshing gears discrimination device

    International Nuclear Information System (INIS)

    Polosky, M.A.; Garcia, E.J.; Allen, J.J.

    1998-01-01

    This paper discusses the design, fabrication and testing of a surface micromachined Counter-Meshing Gears (CMG) discrimination device which functions as a mechanically coded lock, A 24 bit code is input to unlock the device. Once unlocked, the device provides a path for an energy or information signal to pass through the device. The device is designed to immediately lock up if any portion of the 24 bit code is incorrect. The motivation for the development of this device is based on occurrences referred to as High Consequence Events, A High Consequence Event is an event where an inadvertent operation of a system could result in the catastrophic loss of life, property, or damage to the environment

  6. Performance Enhancement of the Patch Antennas Applying Micromachining Technology

    Directory of Open Access Journals (Sweden)

    Mohamed N. Azermanesh

    2007-09-01

    Full Text Available This paper reports on the application of micromachining technology for performance enhancement of two types of compact antennas which are becoming a common practice in microsystems. Shorted patch antennas (SPA and folded shorted patch antennas operating in the 5-6 GHz ISM band, with intended application in short-range wireless communications, are considered. The electrical length of antennas are modified by etching the substrate of the antennas, thus providing a new degree of freedom to control the antenna operating properties, which is the main novelty of our work. The gain and bandwidth of the antennas are increased by increasing the etching depth. However, etching the substrate affects the operating frequency as well. To keep the operating frequency at a pre-specified value, the dimension of the antennas must be increased by deepening the etching depth. Therefore, a trade off between the performance enhancement of the antennas and the dimensional enlargement is required.

  7. Demonstration of robust micromachined jet technology and its application to realistic flow control problems

    Energy Technology Data Exchange (ETDEWEB)

    Chang, Sung Pil [Inha University, Incheon (Korea, Republic of)

    2006-04-15

    This paper describes the demonstration of successful fabrication and initial characterization of micromachined pressure sensors and micromachined jets (microjets) fabricated for use in macro flow control and other applications. In this work, the microfabrication technology was investigated to create a micromachined fluidic control system with a goal of application in practical fluids problems, such as UAV (Unmanned Aerial Vehicle)-scale aerodynamic control. Approaches of this work include : (1) the development of suitable micromachined synthetic jets (microjets) as actuators, which obviate the need to physically extend micromachined structures into an external flow ; and (2) a non-silicon alternative micromachining fabrication technology based on metallic substrates and lamination (in addition to traditional MEMS technologies) which will allow the realization of larger scale, more robust structures and larger array active areas for fluidic systems. As an initial study, an array of MEMS pressure sensors and an array of MEMS modulators for orifice-based control of microjets have been fabricated, and characterized. Both pressure sensors and modulators have been built using stainless steel as a substrate and a combination of lamination and traditional micromachining processes as fabrication technologies.

  8. Multi-Level Micromachined Systems-on-a-Chip: Technology and Applications

    Energy Technology Data Exchange (ETDEWEB)

    Allen, J.J.; Krygowski, T.W.; Miller, S.L.; Montague, S.; Rodgers, M.S.; Smith, J.H.; Sniegowski, J.J.

    1998-10-27

    Researchers at Sandia have recently designed and built several research prototypes, which demonstrate that truly complex mechanical systems can now be realized in a surface micromachined technology. These MicroElectro- Mechanical Systems (MEMS) include advanced actuators, torque multiplying gear tmins, rack and pinion assemblies, positionable mirrors, and mechanical discriminators. All of tile mechanical components are batch fabricated on a single chip of silicon using the infrastructure origimdly developed to support today's highly reliabk; and robust microelectronics industry. Sand ia is also developing the technology 10 integrate microelectronic circuits onto the s,ime piece of silicon that is used to fabricate the MEMS devices. This significantly increases sensitivity and reliability, while fhrther reducing package size and fabrication costs. A review of the MEMS technology and capabilities available at Sandia National Laboratories is presented.

  9. Fiscal 1996 report on technological results. R and D on micromachine technology; 1996 nendo micromachine gijutsu no kenkyu kaihatsu seika hokokusho

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1998-03-01

    Researches on basic element technology of micromachines are conducted that operate autonomously in a narrow small part in a complicated apparatus or in vivo. The areas of activity are (1) research on micromachine systems, (2) a subminiature liquid synthesizing system, and (3) comprehensive investigation and research. In (1), the researches were carried out on the miniaturization and functional combination of a micro laser catheter and a micro tactile sensor catheter, which are the primary components of a coeliac diagnostic and therapeutic system, a 'micro catheter for cerebral blood vessel/treatment', as a micromachine system in the medical field. In (2), R and D was conducted on a system element technology assuming it contributed to a subminiature liquid synthesizing system capable of preparing various liquids including pharmaceuticals accurately with a trace amount. In (3), examination was made on the application area of a micromachine system with priority given to a medical field and also on technological subjects to be tapped, as well as on the contents of (2), with a device installed for evaluating the operating characteristic of a distribution type fluid actuator as needed for the development. (NEDO)

  10. Lead-Free Piezoelectric Diaphragm Biosensors Based on Micro-Machining Technology and Chemical Solution Deposition.

    Science.gov (United States)

    Li, Xiaomeng; Wu, Xiaoqing; Shi, Peng; Ye, Zuo-Guang

    2016-01-12

    In this paper, we present a new approach to the fabrication of integrated silicon-based piezoelectric diaphragm-type biosensors by using sodium potassium niobate-silver niobate (0.82KNN-0.18AN) composite lead-free thin film as the piezoelectric layer. The piezoelectric diaphragms were designed and fabricated by micro-machining technology and chemical solution deposition. The fabricated device was very sensitive to the mass changes caused by various targets attached on the surface of diaphragm. The measured mass sensitivity value was about 931 Hz/μg. Its good performance shows that the piezoelectric diaphragm biosensor can be used as a cost-effective platform for nucleic acid testing.

  11. Lead-Free Piezoelectric Diaphragm Biosensors Based on Micro-Machining Technology and Chemical Solution Deposition

    Directory of Open Access Journals (Sweden)

    Xiaomeng Li

    2016-01-01

    Full Text Available In this paper, we present a new approach to the fabrication of integrated silicon-based piezoelectric diaphragm-type biosensors by using sodium potassium niobate-silver niobate (0.82KNN-0.18AN composite lead-free thin film as the piezoelectric layer. The piezoelectric diaphragms were designed and fabricated by micro-machining technology and chemical solution deposition. The fabricated device was very sensitive to the mass changes caused by various targets attached on the surface of diaphragm. The measured mass sensitivity value was about 931 Hz/μg. Its good performance shows that the piezoelectric diaphragm biosensor can be used as a cost-effective platform for nucleic acid testing.

  12. Optical micro-metrology of structured surfaces micro-machined by jet-ECM

    DEFF Research Database (Denmark)

    Quagliotti, Danilo; Tosello, Guido; Islam, Aminul

    2015-01-01

    A procedure for statistical analysis and uncertainty evaluation is presented with regards to measurements of step height and surface texture. Measurements have been performed with a focus-variation microscope over jet electrochemical micro-machined surfaces. Traceability has been achieved using...

  13. First reliability test of a surface micromachined microengine using SHiMMeR

    Energy Technology Data Exchange (ETDEWEB)

    Tanner, D.M.; Smith, N.F.; Bowman, D.J. [and others

    1997-08-01

    The first-ever reliability stress test on surface micromachined microengines developed at Sandia National Laboratories (SNL) has been completed. We stressed 41 microengines at 36,000 RPM and inspected the functionality at 60 RPM. We have observed an infant mortality region, a region of low failure rate (useful life), and no signs of wearout in the data. The reliability data are presented and interpreted using standard reliability methods. Failure analysis results on the stressed microengines are presented. In our effort to study the reliability of MEMS, we need to observe the failures of large numbers of parts to determine the failure modes. To facilitate testing of large numbers of micromachines. The Sandia High Volume Measurement of Micromachine Reliability (SHiMMeR) system has computer controlled positioning and the capability to inspect moving parts. The development of this parallel testing system is discussed in detail.

  14. Fabrication of surface micromachined ain piezoelectric microstructures and its potential apllication to rf resonators

    NARCIS (Netherlands)

    Saravanan, S.; Saravanan, S.; Berenschot, Johan W.; Krijnen, Gijsbertus J.M.; Elwenspoek, Michael Curt

    2005-01-01

    We report on a novel microfabrication method to fabricate aluminum nitride (AlN) piezoelectric microstructures down to 2 microns size by a surface micromachining process. Highly c-axis oriented AlN thin films are deposited between thin Cr electrodes on polysilicon structural layers by rf reactive

  15. Surface micromachined fabrication of piezoelectric ain unimorph suspension devices for rf resonator applications

    NARCIS (Netherlands)

    Saravanan, S.; Saravanan, S.; Berenschot, Johan W.; Krijnen, Gijsbertus J.M.; Elwenspoek, Michael Curt

    We report a surface micromachining process for aluminum nitride (AlN) thin films to fabricate piezoelectric unimorph suspension devices for actuator applications. Polysilicon is used as a structural layer. Highly c-axis oriented AlN thin films 1 /spl mu/m thick are deposited by rf reactive

  16. Effect of fluorocarbon self-assembled monolayer films on sidewall adhesion and friction of surface micromachines with impacting and sliding contact interfaces

    International Nuclear Information System (INIS)

    Xiang, H.; Komvopoulos, K.

    2013-01-01

    A self-assembled monolayer film consisting of fluoro-octyltrichlorosilane (FOTS) was vapor-phase deposited on Si(100) substrates and polycrystalline silicon (polysilicon) surface micromachines. The hydrophobic behavior and structural composition of the FOTS film deposited on Si(100) were investigated by goniometry and X-ray photoelectron spectroscopy, respectively. The effects of contact pressure, relative humidity, temperature, and impact/sliding cycles on the adhesive and friction behavior of uncoated and FOTS-coated polysilicon micromachines (referred to as the Si and FOTS/Si micromachines, respectively) were investigated under controlled loading and environmental conditions. FOTS/Si micromachines demonstrated much lower and stable adhesion than Si micromachines due to the highly hydrophobic and conformal FOTS film. Contrary to Si micromachines, sidewall adhesion of FOTS/Si micromachines demonstrated a weak dependence on relative humidity, temperature, and impact cycles. In addition, FOTS/Si micromachines showed low and stable adhesion and low static friction for significantly more sliding cycles than Si micromachines. The adhesive and static friction characteristics of Si and FOTS/Si micromachines are interpreted in the context of physicochemical surface changes, resulting in the increase of the real area of contact and a hydrophobic-to-hydrophilic transition of the surface chemical characteristics caused by nanoscale surface smoothening and the removal of the organic residue (Si micromachines) or the FOTS film (FOTS/Si micromachines) during repetitive impact and oscillatory sliding of the sidewall surfaces.

  17. Enhancing structural integrity of adhesive bonds through pulsed laser surface micro-machining

    KAUST Repository

    Diaz, Edwin Hernandez

    2015-06-01

    Enhancing the effective peel resistance of plastically deforming adhesive joints through laser-based surface micro-machining Edwin Hernandez Diaz Inspired by adhesion examples commonly found in nature, we reached out to examine the effect of different kinds of heterogeneous surface properties that may replicate this behavior and the mechanisms at work. In order to do this, we used pulsed laser ablation on copper substrates (CuZn40) aiming to increase adhesion for bonding. A Yb-fiber laser was used for surface preparation of the substrates, which were probed with a Scanning Electron Microscope (SEM) and X-ray Photoelectron Spectroscopy (XPS). Heterogeneous surface properties were devised through the use of simplified laser micromachined patterns which may induce sequential events of crack arrest propagation, thereby having a leveraging effect on dissipation. The me- chanical performance of copper/epoxy joints with homogeneous and heterogeneous laser micromachined interfaces was then analyzed using the T-peel test. Fractured surfaces were analyzed using SEM to resolve the mechanism of failure and adhesive penetration within induced surface asperities from the treatment. Results confirm positive modifications of the surface morphology and chemistry from laser ablation that enable mechanical interlocking and cohesive failure within the adhesive layer. Remarkable improvements of apparent peel energy, bond toughness, and effective peel force were appreciated with respect to sanded substrates as control samples.

  18. A wafer mapping technique for residual stress in surface micromachined films

    International Nuclear Information System (INIS)

    Schiavone, G; Murray, J; Smith, S; Walton, A J; Desmulliez, M P Y; Mount, A R

    2016-01-01

    The design of MEMS devices employing movable structures is crucially dependant on the mechanical behaviour of the deposited materials. It is therefore important to be able to fully characterize the micromachined films and predict with confidence the mechanical properties of patterned structures. This paper presents a characterization technique that enables the residual stress in MEMS films to be mapped at the wafer level by using microstructures released by surface micromachining. These dedicated MEMS test structures and the associated measurement techniques are used to extract localized information on the strain and Young’s modulus of the film under investigation. The residual stress is then determined by numerically coupling this data with a finite element analysis of the structure. This paper illustrates the measurement routine and demonstrates it with a case study using electrochemically deposited alloys of nickel and iron, particularly prone to develop high levels of residual stress. The results show that the technique enables wafer mapping of film non-uniformities and identifies wafer-to-wafer differences. A comparison between the results obtained from the mapping technique and conventional wafer bow measurements highlights the benefits of using a procedure tailored to films that are non-uniform, patterned and surface-micromachined, as opposed to simple standard stress extraction methods. The presented technique reveals detailed information that is generally unexplored when using conventional stress extraction methods such as wafer bow measurements. (paper)

  19. Micromachined sensor and actuator research at Sandia`s Microelectronics Development Laboratory

    Energy Technology Data Exchange (ETDEWEB)

    Smith, J.H.

    1996-11-01

    An overview of the surface micromachining program at the Microelectronics Development Laboratory of Sandia National Laboratories is presented. Development efforts are underway for a variety of surface micromachined sensors and actuators for both defense and commercial applications. A technology that embeds micromechanical devices below the surface of the wafer prior to microelectronics fabrication has been developed for integrating microelectronics with surface-micromachined micromechanical devices. The application of chemical-mechanical polishing to increase the manufacturability of micromechanical devices is also presented.

  20. Micromachined silicon seismic transducers

    Energy Technology Data Exchange (ETDEWEB)

    Barron, C.C.; Fleming, J.G.; Sniegowski, J.J.; Armour, D.L.; Fleming, R.P.

    1995-08-01

    Batch-fabricated silicon seismic transducers could revolutionize the discipline of CTBT monitoring by providing inexpensive, easily depolyable sensor arrays. Although our goal is to fabricate seismic sensors that provide the same performance level as the current state-of-the-art ``macro`` systems, if necessary one could deploy a larger number of these small sensors at closer proximity to the location being monitored in order to compensate for lower performance. We have chosen a modified pendulum design and are manufacturing prototypes in two different silicon micromachining fabrication technologies. The first set of prototypes, fabricated in our advanced surface- micromachining technology, are currently being packaged for testing in servo circuits -- we anticipate that these devices, which have masses in the 1--10 {mu}g range, will resolve sub-mG signals. Concurrently, we are developing a novel ``mold`` micromachining technology that promises to make proof masses in the 1--10 mg range possible -- our calculations indicate that devices made in this new technology will resolve down to at least sub-{mu}G signals, and may even approach to 10{sup {minus}10} G/{radical}Hz acceleration levels found in the low-earth-noise model.

  1. Fibroblast adhesion and activation onto micro-machined titanium surfaces.

    Science.gov (United States)

    Guillem-Marti, J; Delgado, L; Godoy-Gallardo, M; Pegueroles, M; Herrero, M; Gil, F J

    2013-07-01

    Surface modifications performed at the neck of dental implants, in the manner of micro-grooved surfaces, can reduce fibrous tissue encapsulation and prevent bacterial colonization, thereby improving fibrointegration and the formation of a biological seal. However, the applied procedures are technically complex and/or time consuming methods. The aim of this study was to analyse the fibroblast behaviour on modified titanium surfaces obtained, applying a simple and low-cost method. An array of titanium surfaces was obtained using a commercial computerized numerical control lathe, modifying the feed rate and the cutting depth. To elucidate the potential ability of the generated surfaces to activate connective tissue cells, a thorough gene (by real time - qPCR) and protein (by western blot or zymography) expression and cellular response characterization (cell morphology, cell adhesion and cell activation by secreting extracellular matrix (ECM) components and their enzyme regulators) was performed. Micro-grooved surfaces have statistically significant differences in the groove's width (approximately 10, 50 and 100 μm) depending on the applied advancing fixed speed. Field emission scanning electron microscopy images showed that fibroblasts oriented along the generated grooves, but they were only entirely accommodated on the wider grooves (≥50 μm). Micro-grooved surfaces exhibited an earlier cell attachment and activation, as seen by collagen Iα1 and fibronectin deposition and activation of ECM remodelling enzymes, compared with the other surfaces. However, fibroblasts could remain in an activated state on narrower surfaces (micro-grooved surfaces could improve implant integration at the gingival site with respect to polished surfaces. Micro-grooved surfaces enhance early fibroblast adhesion and activation, which could be critical for the formation of a biological seal and finally promote tissue integration. Surfaces with wider grooves (≥50 μm) seem to be more

  2. Effects of Micromachining Processes on Electro-Osmotic Flow Mobility of Glass Surfaces

    Directory of Open Access Journals (Sweden)

    Norihisa Miki

    2013-03-01

    Full Text Available Silica glass is frequently used as a device material for micro/nano fluidic devices due to its excellent properties, such as transparency and chemical resistance. Wet etching by hydrofluoric acid and dry etching by neutral loop discharge (NLD plasma etching are currently used to micromachine glass to form micro/nano fluidic channels. Electro-osmotic flow (EOF is one of the most effective methods to drive liquids into the channels. EOF mobility is affected by a property of the micromachined glass surfaces, which includes surface roughness that is determined by the manufacturing processes. In this paper, we investigate the effect of micromaching processes on the glass surface topography and the EOF mobility. We prepared glass surfaces by either wet etching or by NLD plasma etching, investigated the surface topography using atomic force microscopy, and attempted to correlate it with EOF generated in the micro-channels of the machined glass. Experiments revealed that the EOF mobility strongly depends on the surface roughness, and therefore upon the fabrication process used. A particularly strong dependency was observed when the surface roughness was on the order of the electric double layer thickness or below. We believe that the correlation described in this paper can be of great help in the design of micro/nano fluidic devices.

  3. A novel hybrid surface micromachined segmented mirror for large aperture laser applications

    Science.gov (United States)

    Li, Jie; Chen, Haiqing; Yu, Hongbin

    2006-07-01

    A novel hybrid surface micromachined segmented mirror array is described. This device is capable of scaling to large apertures for correcting time-varying aberrations in laser applications. Each mirror is composed of bottom electrode, support part, and mirror plate, in which a T-shaped beam structure is used to support the mirror plate. It can provide mirror with vertical movement and rotation around two horizontal axes. The test results show that the maximum deflection along the vertical direction of the mirror plate is 2 microns, while the rotation angles around x and y axes are +-2.3 deg. and +-1.45 deg., respectively.

  4. New Effective Material Couple--Oxide Ceramic and Carbon Nanotube-- Developed for Aerospace Microsystem and Micromachine Technologies

    Science.gov (United States)

    Miyoshi, Kazuhisa; VanderWal, Randall L.; Tomasek, Aaron J.; Sayir, Ali; Farmer, Serene C.

    2004-01-01

    The prime driving force for using microsystem and micromachine technologies in transport vehicles, such as spacecraft, aircraft, and automobiles, is to reduce the weight, power consumption, and volume of components and systems to lower costs and increase affordability and reliability. However, a number of specific issues need to be addressed with respect to using microsystems and micromachines in aerospace applications--such as the lack of understanding of material characteristics; methods for producing and testing the materials in small batches; the limited proven durability and lifetime of current microcomponents, packaging, and interconnections; a cultural change with respect to system designs; and the use of embedded software, which will require new product assurance guidelines. In regards to material characteristics, there are significant adhesion, friction, and wear issues in using microdevices. Because these issues are directly related to surface phenomena, they cannot be scaled down linearly and they become increasingly important as the devices become smaller. When microsystems have contacting surfaces in relative motion, the adhesion and friction affect performance, energy consumption, wear damage, maintenance, lifetime and catastrophic failure, and reliability. Ceramics, for the most part, do not have inherently good friction and wear properties. For example, coefficients of friction in excess of 0.7 have been reported for ceramics and ceramic composite materials. Under Alternate Fuels Foundation Technologies funding, two-phase oxide ceramics developed for superior high-temperature wear resistance in NASA's High Operating Temperature Propulsion Components (HOTPC) project and new two-layered carbon nanotube (CNT) coatings (CNT topcoat/iron bondcoat/quartz substrate) developed in NASA's Revolutionary Aeropropulsion Concepts (RAC) project have been chosen as a materials couple for aerospace applications, including micromachines, in the nanotechnology

  5. A novel surface micromachining process to fabricate AlN unimorph suspensions and its application for RF resonators

    NARCIS (Netherlands)

    Saravanan, S.; Saravanan, S.; Berenschot, Johan W.; Krijnen, Gijsbertus J.M.; Elwenspoek, Michael Curt

    2006-01-01

    A novel surface micromachining process is reported for aluminum nitride (AlN) thin films to fabricate piezoelectric unimorph suspension devices for micro actuator applications. Wet anisotropic etching of AlN thin film is used with a Cr metal mask layer in the microfabrication process. Tetra methyl

  6. Dependence of capillary forces on relative humidity and the surface properties of femtosecond laser micromachined titanium.

    Science.gov (United States)

    Lehr, Jorge; Kietzig, Anne-Marie

    2015-06-15

    Capillary forces were measured with colloidal atomic force microscopy at different levels of relative humidity on femtosecond laser micromachined titanium surfaces. After laser machining at different intensity levels, the titanium surfaces show a nanoscale ripple topology or microscopic bumpy structures. Different machining environments were chosen to influence the surface chemistry in addition to topology: while machining in pure oxygen and water resulted in surfaces consisting of TiO2, a composite surface of TiO2 and TiN was obtained after machining in pure nitrogen. All samples were subsequently exposed to pure oxygen, carbon dioxide or water, and showed different levels of wettability and capillary force. We have introduced the concept of humidity sensitivity as the relative increase of the capillary force with respect to the measured force at 0% humidity. We report that samples with a nanoscale ripple topology machined in pure oxygen exhibit the lowest level of capillary force and the lowest sensitivity towards humidity in the environment. Surfaces with low sensitivity towards changes of the relative humidity are good candidates for technical applications, where capillary forces have to be controlled. This study contributes to the development of such surfaces, to a better understanding of how capillary bridges are formed on rough surfaces and ultimately to the exploration of the relationship between surface wettability and capillary forces. Copyright © 2015 Elsevier Inc. All rights reserved.

  7. Monolithic integration of micromachined sensors and CMOS circuits based on SOI technologies

    International Nuclear Information System (INIS)

    Yu Xiaomei; Tang Yaquan; Zhang Haitao

    2008-01-01

    This note presents a novel way to monolithically integrate micro-cantilever sensors and signal conditioning circuits by combining SOI CMOS and SOI micromachining technologies. In order to improve the sensor performance and reduce the system volume, an integrated sensor system composed of a piezoresistive cantilever array, a temperature-compensation current reference, a digitally controlled multiplexer and an instrument amplifier is designed and finally fabricated. A post-SOI CMOS process is developed to realize the integrated sensor system which is based on a standard CMOS process with one more mask to define the cantilever structure at the end of the process. Measurements on the finished SOI CMOS devices and circuits show that the integration process has good compatibility both for the cantilever sensors and for the CMOS circuits, and the SOI CMOS integration process can decrease about 25% sequences compared with the bulk silicon CMOS process. (note)

  8. High efficiency on-chip Dielectric Resonator Antennna using micromachining technology

    KAUST Repository

    Sallam, Mai O.

    2015-10-26

    In this paper, a novel cylindrical Dielectric Resonator Antenna (DRA) operating at 60 GHz is introduced. The antenna is fabricated using a high-resistivity silicon wafer. The DR is defined in the wafer using micromachining technology. The feeding network is located at the other side of the wafer. The proposed antenna is simulated using HFSS and the results are verified by measurements. The antenna radiation is mainly along the broadside direction. The measured gain, radiation efficiency, and bandwidth are 7 dBi, 74.65%, and 2.23 GHz respectively. The antenna is characterized by high polarization purity where the maximum cross-polarization is -15 dB. © 2015 IEEE.

  9. The Effect of Humidity on the Reliability of a Surface Micromachined Microengine

    Energy Technology Data Exchange (ETDEWEB)

    Dugger, M.T.; Eaton, W.P.; Irwin, L.W.; Miller, S.L.; Miller, W.M.; Smith, N.F.; Tanner, D.M.; Walraven, J.A.

    1999-02-02

    Humidity is shown to be a strong factor in the wear of rubbing surfaces in polysilicon micromachines. We demonstrate that very low humidity can lead to very high wear without a significant change in reliability. We show that the volume of wear debris generated is a function of the humidity in an air environment. As the humidity decreases, the wear debris generated increases. For the higher humidity levels, the formation of surface hydroxides may act as a lubricant. The dominant failure mechanism has been identified as wear. The wear debris has been identified as amorphous oxidized silicon. Large slivers (approximately 1 micron in length) of debris observed at the low humidity level were also amorphous oxidized silicon. Using transmission electron microscopy, we observed that the wear debris forms spherical and rod-like shapes. We compared two surface treatment processes: a fluorinated si- lane chain, (FITl) and supercritical C02 dried (SCC02). The microengines using the SCC02 process were found to be less reliable than those released with the FIX process under two humidity levels.

  10. FY 1994 Report on the technical results. Research and development of micromachine technologies (Development of highly functional maintenance technologies for power plants); 1994 nendo micromachine gijutsu no kenkyu kaihatsu seika hokokusho. Hatsuden shisetsuyo kokino maintenance gijutsu kaihatsu

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1995-09-01

    This research and development project is aimed at development of the technologies for the micromachines provided with maintenance functions, e.g., for examination and maintenance of abnormal conditions in heat exchangers, piping systems or the like. The initial target is set at establishment of basic technologies for the micromachines, in consideration of the available technologies. The R and D activities are directed to (1) microcapsules for, e.g., micro power generators, (2) mother machines having controlling and instructing functions, (3) non-cabled examination modules, (4) cabled examination modules, and (5) total systems. The item (1) involves the micro power generators, and mechanisms of signal transmission, flaw finding and driving/suspension; the item (2) mechanisms of micro-optics and connection, group controlling, microbatteries, action type controlling, and artificial muscles; the item (3) expansion/contraction type transfer mechanisms, light energy supply, micro visual sensation, function connection, and concerted controlling; the item (4) tubular manipulators, and mechanisms of light-aided power generation and voltage elevation; and the item (5) maintenance and micromachine systems. (NEDO)

  11. Surface-micromachined magnetic undulator with period length between 10μm and 1 mm for advanced light sources

    Science.gov (United States)

    Harrison, Jere; Joshi, Abhijeet; Lake, Jonathan; Candler, Rob; Musumeci, Pietro

    2012-07-01

    A technological gap exists between the μm-scale wiggling periods achieved using electromagnetic waves of high intensity laser pulses and the mm scale of permanent-magnet and superconducting undulators. In the sub-mm range, surface-micromachined soft-magnetic micro-electro-mechanical system inductors with integrated solenoidal coils have already experimentally demonstrated 100 to 500 mT field amplitude across air gaps as large as 15μm. Simulations indicate that magnetic fields as large as 1.5 T across 50μm inductor gaps are feasible. A simple rearranging of the yoke and pole geometry allows for fabrication of 10+ cm long undulator structures with period lengths between 12.5μm and 1 mm. Such undulators find application both in high average power spontaneous emission sources and, if used in combination with ultrahigh-brightness electron beams, could lead to the realization of low energy compact free-electron lasers. Challenges include electron energy broadening due to wakefields and Joule heating in the electromagnet.

  12. Safety and security monitoring of dams using nano-micromachined-based surface acoustic wave (SAW) sensors

    Science.gov (United States)

    Ross, Wayne, Jr.; Saafi, Mohamed; Romine, Peter; Xiao, Zhigang; Pett, Dave

    2006-03-01

    Concerns about the safety of concrete dams have increased during recent years, partly because the population at risk in locations downstream of major dams continues to expand and also because these old dams are experiencing long-term damage and the seismic design concepts used to build them were inadequate. Reliable techniques for continuous monitoring of certain key parameters affecting the dams' integrity are currently nonexistent and this is because of the lack of sensing technology capable to function in a hostile environment such as low temperatures and high moisture level. This paper presents new low cost, passive and wireless micro-machined SAW-based sensors to monitor the safety and security of dams. These SAW sensors are composed of MEMS transducers, Nano-polymer actuators and an antenna, and are deposited on a thin film substrate. The sensors are passive, do not require power on-board and can be interrogated wireless using a radar. When embedded into concrete dams, the devices will be able to detect and locate internal cracks and measure certain key parameters affecting the durability of dams such as temperature, moisture, pH, chloride and carbon dioxide.

  13. Linkage design effect on the reliability of surface micromachined microengines driving a load

    Energy Technology Data Exchange (ETDEWEB)

    Tanner, D.M.; Peterson, K.A.; Irwin, L.W.; Tangyunyong, P.; Miller, W.M.; Eaton, W.P.; Smith, N.F.; Rodgers, M.S.

    1998-08-01

    The reliability of microengines is a function of the design of the mechanical linkage used to connect the electrostatic actuator to the drive. The authors have completed a series of reliability stress tests on surface micromachined microengines driving an inertial load. In these experiments, the authors used microengines that had pin mechanisms with guides connecting the drive arms to the electrostatic actuators. Comparing this data to previous results using flexure linkages revealed that the pin linkage design was less reliable. The devices were stressed to failure at eight frequencies, both above and below the measured resonance frequency of the microengine. Significant amounts of wear debris were observed both around the hub and pin joint of the drive gear. Additionally, wear tracks were observed in the area where the moving shuttle rubbed against the guides of the pin linkage. At each frequency, they analyzed the statistical data yielding a lifetime (t{sub 50}) for median cycles to failure and {sigma}, the shape parameter of the distribution. A model was developed to describe the failure data based on fundamental wear mechanisms and forces exhibited in mechanical resonant systems. The comparison to the model will be discussed.

  14. Micromachined silicon seismic accelerometer development

    Energy Technology Data Exchange (ETDEWEB)

    Barron, C.C.; Fleming, J.G.; Montague, S. [and others

    1996-08-01

    Batch-fabricated silicon seismic transducers could revolutionize the discipline of seismic monitoring by providing inexpensive, easily deployable sensor arrays. Our ultimate goal is to fabricate seismic sensors with sensitivity and noise performance comparable to short-period seismometers in common use. We expect several phases of development will be required to accomplish that level of performance. Traditional silicon micromachining techniques are not ideally suited to the simultaneous fabrication of a large proof mass and soft suspension, such as one needs to achieve the extreme sensitivities required for seismic measurements. We have therefore developed a novel {open_quotes}mold{close_quotes} micromachining technology that promises to make larger proof masses (in the 1-10 mg range) possible. We have successfully integrated this micromolding capability with our surface-micromachining process, which enables the formation of soft suspension springs. Our calculations indicate that devices made in this new integrated technology will resolve down to at least sub-{mu}G signals, and may even approach the 10{sup -10} G/{radical}Hz acceleration levels found in the low-earth-noise model.

  15. Surface Micromachining Process for the Integration of AlN Piezoelectric Microstructures

    NARCIS (Netherlands)

    Saravanan, S.; Berenschot, Johan W.; Krijnen, Gijsbertus J.M.; Elwenspoek, Michael Curt

    2004-01-01

    We report a novel micromachining process to fabricate AlN (Aluminum Nitride) piezoelectric microstructures for actuator applications. Piezoelectric AlN thin films can be grown with (002) preferential orientation by means of RF reactive sputtering on various substrates. For this study, AlN was

  16. Micro-machining.

    Science.gov (United States)

    Brinksmeier, Ekkard; Preuss, Werner

    2012-08-28

    Manipulating bulk material at the atomic level is considered to be the domain of physics, chemistry and nanotechnology. However, precision engineering, especially micro-machining, has become a powerful tool for controlling the surface properties and sub-surface integrity of the optical, electronic and mechanical functional parts in a regime where continuum mechanics is left behind and the quantum nature of matter comes into play. The surprising subtlety of micro-machining results from the extraordinary precision of tools, machines and controls expanding into the nanometre range-a hundred times more precise than the wavelength of light. In this paper, we will outline the development of precision engineering, highlight modern achievements of ultra-precision machining and discuss the necessity of a deeper physical understanding of micro-machining.

  17. Fiscal 1997 report on technological results. R and D on micromachine technology (Development of micro-factory technology); 1997 nendo micromachine gijutsu no kenkyu kaihatsu seika hokokusho. Microfactory gijutsu kaihatsu

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1998-03-01

    Activities are conducted in search of a micromachine system in which devices and equipment relating to machining, assembly, transportation, inspection, etc., in use for a manufacturing process are integrated in a narrow space, for the purpose of conserving energy through the miniaturization of the process of manufacturing small industrial products. With the activities in the two fields of (1) R and D of systematization technology (experimental system for micro fabrication/assembly) and (2) comprehensive investigation and research, examination on detailed specification for the experimental system was carried out, as were the examination of element technologies, element device operating experiments, technological investigation, etc.. In (1), sophistication of the element technologies was contrived that were required for realizing each experimental system, while the detailed specification of each experimental system was decided. Further, a part of the element devices was experimentally manufactured, with the basic functions verified. In (2), research studies were compiled on radio interference for example in the case where various devices were integrated and highly densified through the formation of a micro-factory; also compiled was a joint research with Agency of Industrial Science and Technology, a research conducted for the purpose of building the conception of the micro-factory. (NEDO)

  18. Fiscal 1997 technological survey report. R and D on micromachine technology (Development of high functional maintenance technology for power station equipment); 1997 nendo micromachine gijutsu no kenkyu kaihatsu seika hokokusho. Hatsuden shisetsuyo kokino maintenance gijutsu kaihatsu

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1998-03-01

    Activities were conducted in search of micromachine technology for a high functional maintenance system that inspects and repairs abnormal conditions such as cracks in a heat exchanger or a piping system without disassembling it in a power generating station such as a thermal or nuclear power plant. The activities were proceeded in four areas of (1) experimental manufacturing of the system (an inline self-running environment recognizing system, an external inspection system for fine tube group, and a system capable of light internal operation such as welding), (2) R and D on sophistication technology for functional devices, (3) R and D on common basic technologies, and (4) comprehensive investigation and research. In (1), examination of detailed basic specifications was carried out, as were examination of element technologies, experimental manufacturing and operation test of element devices, and performance evaluation. Further, a part of element devices was made on an experimental basis, with the basic functions demonstrated. In the comprehensive investigation and research, a trend in the future maintenance technology in power generating equipment was obtained and pigeonholed. (NEDO)

  19. Achievement report for fiscal 1996 on the research and development of micromachine technology. Development of advanced-function maintenance technology for power generation facilities; 1996 nendo micromachine gijutsu no kenkyu kaihatsu seika hokokusho. Hatsuden shisetsuyo kokino maintenance gijutsu kaihatsu

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1997-03-01

    Technologies for integrating functions are studied for a self-propelled surroundings recognition system that travels in a small-diameter tube at power generation facilities. Parameters are analyzed, and piezoelectric locomotion devices are reduced in size. A disk shape microantenna is experimentally built and evaluated, which is for realizing energy supply and communication by means of microwaves. Studies are conducted to improve the performance of optical energy transmission devices and to realize their systematization. Basic specifications are established for the embodiment of CCD (charge coupled device) microcameras to be installed. A high-efficiency, high-reliability micromachine system is constructed, in which multiple machines coordinate with each other for the exterior inspection of groups of small-diameter tubes. Devices which are capable of driving, deceleration, and propulsion prove to be feasible. Basic specifications are established for microconnectors to connect, separate, and combine multiple machines as occasion calls. Also discussed is the development of a micromachine for tube interior check and repair which operates making use of the inspection hole enabling tube interior check and repair without the need of disassembling the equipment to be repaired.

  20. Fiscal 1993 report on technological results. R and D on micromachine technology; 1993 nendo micro machine gijutsu no kenkyu kaihatsu seika hokokusho

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1994-12-01

    Researches on basic element technology of micromachines are conducted with the view of establishing a mechanical system constituted of minute functional elements that perform autonomous operations in a narrow small part of complicated equipment in a power station for example or in a living body. The areas of activity are 1. research on micro actuators and 2. research on basic technology of micromachine; 1 is classified into researches of (1) shape-memory actuator, (2) bending and stretching type actuator, and (3) integrated micro actuator, while 2 is classified into researches of (1) total system for medical diagnosis, (2) micro tactile sensing technology and laser applied diagnosis/treatment technology, and (3) blood pressure/blood circulation sensing technology. In 1-(1), a chemo-mechanical actuator was studied using a shape memory alloy (SMA) and a high polymer gel, and in 1-(2), an SMA and bimetal were employed as a source of the driving force. Further, examination was also made on a fluid driving type actuator. (NEDO)

  1. Surface micromachined MEMS deformable mirror based on hexagonal parallel-plate electrostatic actuator

    Science.gov (United States)

    Ma, Wenying; Ma, Changwei; Wang, Weimin

    2018-03-01

    Deformable mirrors (DM) based on microelectromechanical system (MEMS) technology are being applied in adaptive optics (AO) system for astronomical telescopes and human eyes more and more. In this paper a MEMS DM with hexagonal actuator is proposed and designed. The relationship between structural design and performance parameters, mainly actuator coupling, is analyzed carefully and calculated. The optimum value of actuator coupling is obtained. A 7-element DM prototype is fabricated using a commercial available standard three-layer polysilicon surface multi-user-MEMS-processes (PolyMUMPs). Some key performances, including surface figure and voltage-displacement curve, are measured through a 3D white light profiler. The measured performances are very consistent with the theoretical values. The proposed DM will benefit the miniaturization of AO systems and lower their cost.

  2. A row-column addressed micromachined ultrasonic transducer array for surface scanning applications.

    Science.gov (United States)

    Wong, Lawrence L P; Chen, Albert I H; Li, Zhenhao; Logan, Andrew S; Yeow, John T W

    2014-12-01

    Row-column addressed arrays for ultrasonic non-destructive testing (NDT) applications are analyzed and demonstrated in this paper. Simulation and experimental results of a row-column addressed 32 by 32 capacitive micromachined ultrasonic transducer (CMUT) array are presented. The CMUT array, which was designed for medical imaging applications, has a center frequency of 5.3MHz. The CMUT array was used to perform C-scans on test objects with holes that have diameters of 1.0mm and 0.5mm. The array transducer has an aperture size of 4.8mm by 4.8mm, and it was used to scan an area of 4.0mm by 4.0mm. Compared to an N by N fully addressed 2-D array, a row-column addressed array of the same number of elements requires fewer (N instead of N(2)) pairs of interconnection and supporting electronic components such as pulsers and amplifiers. Even though the resulting field of view is limit by the aperture size, row-column addressed arrays and the row-column addressing scheme can be an alternative option of 2-D arrays for NDT applications. Copyright © 2014 Elsevier B.V. All rights reserved.

  3. Advanced Surface Technology

    DEFF Research Database (Denmark)

    Møller, Per; Nielsen, Lars Pleht

    This new significant book on advanced modern surface technology in all its variations, is aimed at both teaching at engineering schools and practical application in industry. The work covers all the significant aspects of modern surface technology and also describes how new advanced techniques make...... of the components. It covers everything from biocompatible surfaces of IR absorbent or reflective surfaces to surfaces with specific properties within low friction, hardness, corrosion, colors, etc. The book includes more than 400 pages detailing virtually all analysis methods for examining at surfaces....

  4. Advanced Surface Technology

    DEFF Research Database (Denmark)

    Møller, Per; Nielsen, Lars Pleht

    , nitriding, carbonitriding, and many other lesser-known thermochemical processes used for solving technological problems. The book is richly illustrated with pictures and figures showing how the technology creates new innovative solutions for industry and how surfaces are becoming integral to the function......This new significant book on advanced modern surface technology in all its variations, is aimed at both teaching at engineering schools and practical application in industry. The work covers all the significant aspects of modern surface technology and also describes how new advanced techniques make...

  5. Advanced Surface Technology

    DEFF Research Database (Denmark)

    Møller, Per; Nielsen, Lars Pleht

    This new significant book on advanced modern surface technology in all its variations, is aimed at both teaching at engineering schools and practical application in industry. The work covers all the significant aspects of modern surface technology and also describes how new advanced techniques make......, nitriding, carbonitriding, and many other lesser-known thermochemical processes used for solving technological problems. The book is richly illustrated with pictures and figures showing how the technology creates new innovative solutions for industry and how surfaces are becoming integral to the function...

  6. Advanced Surface Technology

    DEFF Research Database (Denmark)

    Møller, Per; Nielsen, Lars Pleht

    of the components. It covers everything from biocompatible surfaces of IR absorbent or reflective surfaces to surfaces with specific properties within low friction, hardness, corrosion, colors, etc. The book includes more than 400 pages detailing virtually all analysis methods for examining at surfaces.......This new significant book on advanced modern surface technology in all its variations, is aimed at both teaching at engineering schools and practical application in industry. The work covers all the significant aspects of modern surface technology and also describes how new advanced techniques make...... it possible to examine surfaces all the way down to their atomic layers and also to perform realistic durability tests. The many surface techniques are described in clear and simple language, and the book is richly illustrated with detailed drawings and photos. It also deals with replacing environmentally...

  7. Surface-micromachined magnetic undulator with period length between 10  μm and 1 mm for advanced light sources

    Directory of Open Access Journals (Sweden)

    Jere Harrison

    2012-07-01

    Full Text Available A technological gap exists between the μm-scale wiggling periods achieved using electromagnetic waves of high intensity laser pulses and the mm scale of permanent-magnet and superconducting undulators. In the sub-mm range, surface-micromachined soft-magnetic micro-electro-mechanical system inductors with integrated solenoidal coils have already experimentally demonstrated 100 to 500 mT field amplitude across air gaps as large as 15  μm. Simulations indicate that magnetic fields as large as 1.5 T across 50  μm inductor gaps are feasible. A simple rearranging of the yoke and pole geometry allows for fabrication of 10+ cm long undulator structures with period lengths between 12.5  μm and 1 mm. Such undulators find application both in high average power spontaneous emission sources and, if used in combination with ultrahigh-brightness electron beams, could lead to the realization of low energy compact free-electron lasers. Challenges include electron energy broadening due to wakefields and Joule heating in the electromagnet.

  8. Surface-Micromachined Neural Sensors with Integrated Double Side Recordings on Dry-Etch Benzocyclobutene(BCB) Substrate.

    Science.gov (United States)

    Zhu, Haixin; He, Jiping; Kim, Bruce

    2005-01-01

    a neural sensor with novel structure and capable of double side recordings has been designed and fabricated using surface micromachining technique. Dry-etch Benzocyclobutene (BCB) was selected as the substrate and packaging material for its excellent electrical, mechanical and thermal properties. Positive photoresist (AZ4620) was used as the sacrificial layer during the formation of backside recording sites, and the lift-off process combined with BCB dry etch technique was developed to open the recording sites on the backside. The finished device has intracortical recording sites on both sides, and also epidural recording sites on the front side. The total channel number doubled compared to that of single side electrode structure. Three dry-etch BCB layers were applied to insulate the front side conduction traces from the backside trace layer, and package the entire devices. The developed process shows reliable and high fabrication yield, and results suggest that this newly developed neural sensor could improve the performance and efficiency of neural recording.

  9. Optimization of micropipette fabrication by laser micromachining for application in an ultrafine atmospheric pressure plasma jet using response surface methodology

    International Nuclear Information System (INIS)

    Wang, Tao; Liu, Jingquan; Yang, Bin; Chen, Xiang; Wang, Xiaolin; Yang, Chunsheng

    2016-01-01

    The optimization of the laser micromachining process for special tapered micropipettes was investigated using response surface methodology. Three process parameters for the CO 2 laser-based micropipette puller (P-2000, Sutter Instrument) were chosen as variables, namely heat, velocity and pull. The targeted length L TVS of the tapered variant section with a tip diameter of 10 μ m was taken as a response. The optimum process parameters with L TVS of 7.3 mm were determined by analyzing the response surface three-dimension surface plots. The central composite design was selected to optimize the process variables, and the experimental data were fitted into a reduced cubic polynomial model. The high R 2 value (99.66%) and low coefficient of variation (0.73%) indicated the statistical significance of the model and good precision for the experiment. The optimization result showed that the best parameters were with the heat, velocity and pull values of 850, 53 and 170, respectively. The result was verified by a CO 2 laser-based micropipette puller three times with length L TVS at 7.26 mm, 7.35 mm and 7.36 mm with the same optimized parameters. Then, the application to the ultrafine atmospheric pressure He/O 2 plasma jets was carried out and micro-hole etching of the parylene-C film was realized with length L TVS at 6.29 mm, 7.35 mm and 8.02 mm. The results showed that the micro-plasma jet with an L TVS of 7.35 mm had the minimum applied voltage of 12.7 kV and the minimum micro-etching diameter of 45 μ m with the deepest etching depth of 2.8 μ m. (paper)

  10. Micromachined Piezoelectric Actuators for Cryogenic Adaptive Optics, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — TRS Technologies proposes micromachined single crystal piezoelectric actuator arrays to enable ultra-large stroke, high precision shape control for large aperture,...

  11. Achievement report on commissioned research of R and D in fiscal 2000 on micromachine technologies. Development of high function maintenance technology for power generation facilities; 2000 nendo kenkyu seika hokokusho. Hatsuden shisetsu you kokino mentenansu gijutsu kaihatsu

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    2001-03-01

    R and D has been carried out on a high function maintenance system that performs inspection and repair of anomalies such as internal cracks by using micromachines without need of disassembling heat exchangers and piping systems in power generation facilities. This paper summarizes the achievements in fiscal 2000. In the research of a prototype self-propelled system to recognize environment in tubes, the secondary prototype system integrating all of the elemental devices was fabricated, and its functions were verified. In the research of a prototype system to inspect outer surface of fine tube groups, a plurality of single machines that perform movement in narrow spaces on flat surface, interlocking, separation and flaw detection were connected to execute a vertical movement experiment. In the research of a prototype system for works internal to devices, fabrication and functional verification were conducted on the final prototype system which is equipped with functions of measuring very small nicks and performing repair works, which are mounted on the tip of a curved tube unit with multiple degrees of freedom. In the research of a functional device improving technology, a device that puts together artificial muscles, micro-joints, and a suspension device with very low friction was fabricated, and a functional verification was implemented thereon. (NEDO)

  12. Acceleration of dormant storage effects to address the reliability of silicon surface micromachined Micro-Electro-Mechanical Systems (MEMS).

    Energy Technology Data Exchange (ETDEWEB)

    Cox, James V.; Candelaria, Sam A.; Dugger, Michael Thomas; Duesterhaus, Michelle Ann; Tanner, Danelle Mary; Timpe, Shannon J.; Ohlhausen, James Anthony; Skousen, Troy J.; Jenkins, Mark W.; Jokiel, Bernhard, Jr.; Walraven, Jeremy Allen; Parson, Ted Blair

    2006-06-01

    Qualification of microsystems for weapon applications is critically dependent on our ability to build confidence in their performance, by predicting the evolution of their behavior over time in the stockpile. The objective of this work was to accelerate aging mechanisms operative in surface micromachined silicon microelectromechanical systems (MEMS) with contacting surfaces that are stored for many years prior to use, to determine the effects of aging on reliability, and relate those effects to changes in the behavior of interfaces. Hence the main focus was on 'dormant' storage effects on the reliability of devices having mechanical contacts, the first time they must move. A large number ({approx}1000) of modules containing prototype devices and diagnostic structures were packaged using the best available processes for simple electromechanical devices. The packaging processes evolved during the project to better protect surfaces from exposure to contaminants and water vapor. Packages were subjected to accelerated aging and stress tests to explore dormancy and operational environment effects on reliability and performance. Functional tests and quantitative measurements of adhesion and friction demonstrated that the main failure mechanism during dormant storage is change in adhesion and friction, precipitated by loss of the fluorinated monolayer applied after fabrication. The data indicate that damage to the monolayer can occur at water vapor concentrations as low as 500 ppm inside the package. The most common type of failure was attributed to surfaces that were in direct contact during aging. The application of quantitative methods for monolayer lubricant analysis showed that even though the coverage of vapor-deposited monolayers is generally very uniform, even on hidden surfaces, locations of intimate contact can be significantly depleted in initial concentration of lubricating molecules. These areas represent defects in the film prone to adsorption of

  13. Surface micromachined scanning mirrors

    DEFF Research Database (Denmark)

    Mattsson, Kent Erik

    1992-01-01

    Both aluminum cantilever and torsional scanning mirrors have been fabricated and their static and dynamic properties are studied experimentally and theoretically. The experiments showed resonance frequencies in the range of 163 k-Hz - 632 kHz for cantilever beams with Q values between 5 and 11....... Torsional mirrors showed resonance frequencies in the range of 410 kHz - 667 kHz with Q values of 10 - 17. All measurements performed at atmospheric pressure. Both types of mechanical structures were deflected electrostatically at large angles (± 5°) more than 1011 times without breaking and without any...

  14. Micromachined Precision Inertial Instruments

    National Research Council Canada - National Science Library

    Najafi, Khalil

    2003-01-01

    This program focuses on developing inertial-grade micromachined accelerometers and gyroscopes and their associated electronics and packaging for use in a variety of military and commercial applications...

  15. Micromachined electrode array

    Science.gov (United States)

    Okandan, Murat; Wessendorf, Kurt O.

    2007-12-11

    An electrode array is disclosed which has applications for neural stimulation and sensing. The electrode array, in certain embodiments, can include a plurality of electrodes each of which is flexibly attached to a common substrate using a plurality of springs to allow the electrodes to move independently. In other embodiments of the electrode array, the electrodes can be fixed to the substrate. The electrode array can be formed from a combination of bulk and surface micromachining, and can include electrode tips having an electroplated metal (e.g. platinum, iridium, gold or titanium) or a metal oxide (e.g. iridium oxide) for biocompatibility. The electrode array can be used to form a part of a neural prosthesis, and is particularly well adapted for use in an implantable retinal prosthesis.

  16. Micromachined droplet ejector arrays

    Science.gov (United States)

    Perçin, Gökhan; Yaralioglu, Göksenin G.; Khuri-Yakub, Butrus T.

    2002-12-01

    In this article we present a micromachined flextensional droplet ejector array used to eject liquids. By placing a fluid behind one face of a vibrating circular plate that has an orifice at its center, we achieve continuous ejection of the fluid. We present results of ejection of water and isopropanol. The ejector is harmless to sensitive fluids and can be used to eject fuels, organic polymers, photoresists, low-k dielectrics, adhesives, and chemical and biological samples. Micromachined two-dimensional array flextensional droplet ejectors were realized using planar silicon micromachining techniques. Typical resonant frequency of the micromachined device ranges from 400 kHz to 4.5 MHz. The ejections of water through a 4 μm diameter orifice at 3.45 MHz and a 10 μm diameter orifice at 2.15 MHz were demonstrated by using the developed micromachined two-dimensional array ejectors.

  17. Vascular tissue engineering by computer-aided laser micromachining.

    Science.gov (United States)

    Doraiswamy, Anand; Narayan, Roger J

    2010-04-28

    Many conventional technologies for fabricating tissue engineering scaffolds are not suitable for fabricating scaffolds with patient-specific attributes. For example, many conventional technologies for fabricating tissue engineering scaffolds do not provide control over overall scaffold geometry or over cell position within the scaffold. In this study, the use of computer-aided laser micromachining to create scaffolds for vascular tissue networks was investigated. Computer-aided laser micromachining was used to construct patterned surfaces in agarose or in silicon, which were used for differential adherence and growth of cells into vascular tissue networks. Concentric three-ring structures were fabricated on agarose hydrogel substrates, in which the inner ring contained human aortic endothelial cells, the middle ring contained HA587 human elastin and the outer ring contained human aortic vascular smooth muscle cells. Basement membrane matrix containing vascular endothelial growth factor and heparin was to promote proliferation of human aortic endothelial cells within the vascular tissue networks. Computer-aided laser micromachining provides a unique approach to fabricate small-diameter blood vessels for bypass surgery as well as other artificial tissues with complex geometries.

  18. Micromachined patch-clamp apparatus

    Science.gov (United States)

    Okandan, Murat

    2012-12-04

    A micromachined patch-clamp apparatus is disclosed for holding one or more cells and providing electrical, chemical, or mechanical stimulation to the cells during analysis with the patch-clamp technique for studying ion channels in cell membranes. The apparatus formed on a silicon substrate utilizes a lower chamber formed from silicon nitride using surface micromachining and an upper chamber formed from a molded polymer material. An opening in a common wall between the chambers is used to trap and hold a cell for analysis using the patch-clamp technique with sensing electrodes on each side of the cell. Some embodiments of the present invention utilize one or more electrostatic actuators formed on the substrate to provide mechanical stimulation to the cell being analyzed, or to provide information about mechanical movement of the cell in response to electrical or chemical stimulation.

  19. Omega-X micromachining system

    International Nuclear Information System (INIS)

    Miller, D.M.

    1978-01-01

    A micromachining tool system with X- and omega-axes is used to machine spherical, aspherical, and irregular surfaces with a maximum contour error of 100 nonometers (nm) and surface waviness of no more than 0.8 nm RMS. The omega axis, named for the angular measurement of the rotation of an eccentric mechanism supporting one end of a tool bar, enables the pulse increments of the tool toward the workpiece to be as little as 0 to 4.4 nm. A dedicated computer coordinates motion in the two axes to produce the workpiece contour. Inertia is reduced by reducing the mass pulsed toward the workpiece to about one-fifth of its former value. The tool system includes calibration instruments to calibrate the micromachining tool system. Backlash is reduced and flexing decreased by using a rotary table and servomotor to pulse the tool in the omega-axis instead of a ball screw mechanism. A thermally-stabilized spindle roates the workpiece and is driven by a motor not mounted on the micromachining tool base through a torque-smoothing pulley and vibrationless rotary coupling. Abbe offset errors are almost eliminated by tool setting and calibration at spindle center height. Tool contour and workpiece contour are gaged on the machine; this enables the source of machining errors to be determined more readily, because the workpiece is gaged before its shape can be changed by removal from the machine

  20. Achievement report for fiscal 1996 on the research and development of micromachine technology. Development of microfactory technology; 1996 nendo micromachine gijutsu no kenkyu kaihatsu seika hokokusho. Microfactory gijutsu kaihatsu

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1997-03-01

    The goal is to save energy and minimize the working space by constructing a manufacturing system comprising various micromachines with their dimensions fit for parts and products they handle. Development continues relative to microprocessing (electrolysis, and optical processing) and microscopic liquid operation (micropump, and part holding device). Under research in relation to the assembly process are a micro-arm to handle tiny parts and precision techniques for interfitting within a very small microfactory, a piezoelectric actuator for microscopic position adjusting, and ultraprecise microprocessing techniques indispensable for their manufacture. Also under research are the incorporation of optically driven microdevices developed before the preceding fiscal year into a microfactory and the study of microservo actuators capable of sophisticated positioning and velocity control. Concerning the microscopic transport system to deal with microscopic parts and products, studies are under way so as to embody systems driven by actuators of the electromagnetic type and electrostatic type. In this paper, reference is made to inspection techniques and comprehensive investigations. (NEDO)

  1. Planar silicon fabrication process for high-aspect-ratio micromachined parts

    Energy Technology Data Exchange (ETDEWEB)

    Barron, C.C.; Fleming, J.G. [Sandia National Labs., Albuquerque, NM (United States). Microelectronics Development Lab.

    1997-09-01

    Surface-micromachined silicon inertial sensors are limited to relatively high-G applications in part because of the fundamental limitations on proof mass imposed by the manufacturing technology. At the same time, traditional micromolding technologies such as LIGA do not lend themselves to integration with electronics, a capability which is equally necessary for high-performance inertial sensors. The silicon micromolding processes described in this report promise to offer both larger proof masses and integrability with on-chip electronics. In Sandia`s silicon micromolding process, the proof mass is formed using a mold which is first recessed into the substrate using a deep silicon trench etch, then lined with a sacrificial or etch-stop layer, and filled with mechanical polysilicon. Since the mold is recessed into the substrate, the whole micromechanical structure can be formed, planarized, and integrated with standard silicon microelectronic circuits before the release etch. In addition, unlike surface-micromachined parts, the thickness of the molded parts is limited by the depth of the trench etch (typically 10--50 {micro}m) rather than the thickness of deposited polysilicon (typically 2 {micro}m). The fact that the high-aspect-ratio section of the device is embedded in the substrate enables the monolithic integration of high-aspect-ratio parts with surface-micromachined mechanical parts, and, in the future, also electronics. The authors anticipate that such an integrated mold/surface micromachining/electronics process will offer versatile high-aspect-ratio micromachined structures that can be batch-fabricated and monolithically integrated into complex microelectromechanical systems including high-performance inertial sensing systems.

  2. A level set methodology for predicting the effect of mask wear on surface evolution of features in abrasive jet micro-machining

    International Nuclear Information System (INIS)

    Burzynski, T; Papini, M

    2012-01-01

    A previous implementation of narrow-band level set methodology developed by the authors was extended to allow for the modelling of mask erosive wear in abrasive jet micro-machining (AJM). The model permits the prediction of the surface evolution of both the mask and the target simultaneously, by representing them as a hybrid and continuous mask–target surface. The model also accounts for the change in abrasive mass flux incident to both the target surface and, for the first time, the eroding mask edge, that is brought about by the presence of the mask edge itself. The predictions of the channel surface and eroded mask profiles were compared with measurements on channels machined in both glass and poly-methyl-methacrylate (PMMA) targets at both normal and oblique incidence, using tempered steel and elastomeric masks. A much better agreement between the predicted and measured profiles was found when mask wear was taken into account. Mask wear generally resulted in wider and deeper glass target profiles and wider PMMA target profiles, respectively, when compared to cases where no mask wear was present. This work has important implications for the AJM of complex MEMS and microfluidic devices that require longer machining times. (paper)

  3. Laser Micromachining and Information Discovery Using a Dual Beam Interferometry

    Energy Technology Data Exchange (ETDEWEB)

    Theppakuttaikomaraswamy, Senthil P. [Iowa State Univ., Ames, IA (United States)

    2001-01-01

    Lasers have proven to be among the most promising tools for micromachining because they can process features down to the size of the laser wavelength (smaller than 1 micrometer) and they provide a non-contact technology for machining. The demand for incorporating in-situ diagnostics technology into the micromachining environment is driven by the increasing need for producing micro-parts of high quality and accuracy. Laser interferometry can be used as an on-line monitoring tool and it is the aim of this work to enhance the understanding and application of Michelson interferometry principle for the in-situ diagnostics of the machining depth on the sub-micron and micron scales. micromachining is done on two different materials and a comprehensive investigation is done to control the width and depth of the machined feature. To control the width of the feature, laser micromachining is done on copper and a detailed analysis is performed. The objective of this experiment is to make a precision mask for sputtering with an array of holes on it using an Nd:YAG laser of 532 nm wavelength. The diameter of the hole is 50 μm and the spacing between holes (the distance between the centers) is 100 μm. Michelson interferometer is integrated with a laser machining system to control the depth of machining. An excimer laser of 308 nm wavelength is used for micromachining. A He-Ne laser of 632.8 nm wavelength is used as the light source for the interferometer. Interference patterns are created due to the change in the path length between the two interferometer arms. The machined depth information is obtained from the interference patterns on an oscilloscope detected by a photodiode. To compare the predicted depth by the interferometer with the true machining depth, a surface profilometer is used to measure the actual machining depth on the silicon. It is observed that the depths of machining obtained by the surface profile measurement are in accordance with the interferometer

  4. Silicon Micromachining for Terahertz Component Development

    Science.gov (United States)

    Chattopadhyay, Goutam; Reck, Theodore J.; Jung-Kubiak, Cecile; Siles, Jose V.; Lee, Choonsup; Lin, Robert; Mehdi, Imran

    2013-01-01

    Waveguide component technology at terahertz frequencies has come of age in recent years. Essential components such as ortho-mode transducers (OMT), quadrature hybrids, filters, and others for high performance system development were either impossible to build or too difficult to fabricate with traditional machining techniques. With micromachining of silicon wafers coated with sputtered gold it is now possible to fabricate and test these waveguide components. Using a highly optimized Deep Reactive Ion Etching (DRIE) process, we are now able to fabricate silicon micromachined waveguide structures working beyond 1 THz. In this paper, we describe in detail our approach of design, fabrication, and measurement of silicon micromachined waveguide components and report the results of a 1 THz canonical E-plane filter.

  5. Mechanical Micro-Machining and Laser Micro-Machining

    Science.gov (United States)

    Lou, Ning

    Ever since the 2000s, the manufacturing industry has gained tremendous development in terms of precision. Therefore, micro-machining as a cutting-edge technique has drawn more and more attention in precision-machining realm and been able to take on challenges brought by this. This doctoral program explores the micro-machining realm and results are consisted of two major parts. First, the machinability of "difficult-to-cut" materials is of interest where Inconel 718 is selected as its characteristics include outstanding strength and lackluster thermal conductivity. For its extraordinary hardness and sustainability, coated cemented carbide tools are selected for micro-endmilling processes on Inconel. The cutting forces along x and y axis, respectively, are analyzed to reveal any impact from the inputs. Moreover, the chip morphology is examined. Suggestions are made for future research guidance. As first part serves as preliminary work of the program, the research carries onto the second part - laser micro-machining which is considerably different from conventional machining. The laser being considered employs pulsewidth in realm of picosecond (10-12 s) and frequency of tens of kilohertz. This results in a very small energy distribution per pulse (microJ) and is called ultrafast or ultrashort laser machining. To study this type of technology, an all-new machining system needs to be built incorporating highly advanced apparatus such as laser head, scan head, attenuator, and beam expander, et al. From exit of laser head to workpiece, laser need to travel through all optical components and any deviation may leads to severe out-of-focus error as the depth of focus is within micron level. Thus, optical alignment along laser travelling route is key to successful machining results. This part of research focuses on the design and assembly of this system as a reliable structure offering both support and alignment to the laser delivery. 3-Dimentional (3D) Computer

  6. Micromachining with copper lasers

    Science.gov (United States)

    Knowles, Martyn R. H.; Bell, Andy; Foster-Turner, Gideon; Rutterford, Graham; Chudzicki, J.; Kearsley, Andrew J.

    1997-04-01

    In recent years the copper laser has undergone extensive development and has emerged as a leading and unique laser for micromachining. The copper laser is a high average power (10 - 250 W), high pulse repetition rate (2 - 32 kHz), visible laser (511 nm and 578 nm) that produces high peak power (typically 200 kW), short pulses (30 ns) and very good beam quality (diffraction limited). This unique set of laser parameters results in exceptional micro-machining in a wide variety of materials. Typical examples of the capabilities of the copper laser include the drilling of small holes (10 - 200 micrometer diameter) in materials as diverse as steel, ceramic, diamond and polyimide with micron precision and low taper (less than 1 degree) cutting and profiling of diamond. Application of the copper laser covers the electronic, aerospace, automotive, nuclear, medical and precision engineering industries.

  7. Structure optimization and simulation analysis of the quartz micromachined gyroscope

    Directory of Open Access Journals (Sweden)

    Xuezhong Wu

    2014-02-01

    Full Text Available Structure optimization and simulation analysis of the quartz micromachined gyroscope are reported in this paper. The relationships between the structure parameters and the frequencies of work mode were analysed by finite element analysis. The structure parameters of the quartz micromachined gyroscope were optimized to reduce the difference between the frequencies of the drive mode and the sense mode. The simulation results were proved by testing the prototype gyroscope, which was fabricated by micro-electromechanical systems (MEMS technology. Therefore, the frequencies of the drive mode and the sense mode can match each other by the structure optimization and simulation analysis of the quartz micromachined gyroscope, which is helpful in the design of the high sensitivity quartz micromachined gyroscope.

  8. The micromachined logo of Atomki

    International Nuclear Information System (INIS)

    Rajta, I.; Szilasi, S.Z.

    2006-01-01

    Complete text of publication follows. Proton Beam Micromachining, also known as P-beam Writing, is a direct write 3- dimensional lithographic technique. Conventional resist types are PMMA (polymethylmethacrylate), and SU-8 (of MicroChem Corp.); they are positive and negative resists, respectively. In this work we used SU-8, the most common negative resist material. SU-8 was spun on a flat surface, typically Silicon or glass. A direct write proton beam was scanned over an arbitary structure (the Atomki logo can be replaced by any other structure), which produces chain scissioning in the polymer. Post exposure bake (PEB) is usually needed in case of conventional optical lithography, but using protons this bake is done in situ as the ions heat up the sample in vacuum. Subsequently chemical etching takes place, the solvent is available at MicroChem Corp. The schematic diagram of the above described micromachining process is shown on Fig. 1. The irradiation requires a scanning proton microbeam system equipped with suitable beam scanning and blanking facilities. This is available in the Institute, our setup has been upgraded from doublet to triplet focusing system (Oxford Microbeams Ltd.). For scanning we use a DIO card (PCI-6731 of National Instruments), and the IonScan software [1]. Sample preparation was carried out at our 'semi clean' room. This is also where chemical development of the samples and the optical microscopy have been done too. A Zeiss Axio Imager microscope is available (equipped with 5 objective lenses, 4 different contrast methods, transmitted or reflected light illumination). Fig. 2. shows a typical example of the Atomki logo. This is a bright field image, a number of different nice and colourful images can be produced with the other contrast techniques (for more images see the Institute website: http://www.atomki.hu/ ). (author)

  9. Trends in laser micromachining

    Science.gov (United States)

    Gaebler, Frank; van Nunen, Joris; Held, Andrew

    2016-03-01

    Laser Micromachining is well established in industry. Depending on the application lasers with pulse length from μseconds to femtoseconds and wavelengths from 1064nm and its harmonics up to 5μm or 10.6μm are used. Ultrafast laser machining using pulses with pico or femtosecond duration pulses is gaining traction, as it offers very precise processing of materials with low thermal impact. Large-scale industrial ultrafast laser applications show that the market can be divided into various sub segments. One set of applications demand low power around 10W, compact footprint and are extremely sensitive to the laser price whilst still demanding 10ps or shorter laser pulses. A second set of applications are very power hungry and only become economically feasible for large scale deployments at power levels in the 100+W class. There is also a growing demand for applications requiring fs-laser pulses. In our presentation we would like to describe these sub segments by using selected applications from the automotive and electronics industry e.g. drilling of gas/diesel injection nozzles, dicing of LED substrates. We close the presentation with an outlook to micromachining applications e.g. glass cutting and foil processing with unique new CO lasers emitting 5μm laser wavelength.

  10. Energy conservation potential of surface modification technologies

    Energy Technology Data Exchange (ETDEWEB)

    Le, H.K.; Horne, D.M.; Silberglitt, R.S.

    1985-09-01

    This report assesses the energy conservation impact of surface modification technologies on the metalworking industries. The energy conservation impact of surface modification technologies on the metalworking industries is assessed by estimating their friction and wear tribological sinks and the subsequent reduction in these sinks when surface modified tools are used. Ion implantation, coatings, and laser and electron beam surface modifications are considered.

  11. Micromachining with Nanostructured Cutting Tools

    CERN Document Server

    Jackson, Mark J

    2013-01-01

    The purpose of the brief is to explain how nanostructured tools can be used to machine materials at the microscale.  The aims of the brief are to explain to readers how to apply nanostructured tools to micromachining applications. This book describes the application of nanostructured tools to machining engineering materials and includes methods for calculating basic features of micromachining. It explains the nature of contact between tools and work pieces to build a solid understanding of how nanostructured tools are made.

  12. Exploration technology surface systems: Surface Habitats And Construction (SHAC)

    Science.gov (United States)

    Hirschbein, Murray

    1991-01-01

    The objectives of exploration technology program - surface systems are: (1) to develop technology emplace and to build an outpost on the moon and Mars; and (2) to develop concepts for permanent habitats and enclosures on the Moon and Mars.

  13. Silicon-micromachined microchannel plates

    Energy Technology Data Exchange (ETDEWEB)

    Beetz, Charles P. E-mail: NanoSystem@aol.com; Boerstler, Robert; Steinbeck, John; Lemieux, Bryan; Winn, David R. E-mail: winn@fair1.fairfield.edu

    2000-03-11

    Microchannel plates (MCP) fabricated from standard silicon wafer substrates using a novel silicon micromachining process, together with standard silicon photolithographic process steps, are described. The resulting SiMCP microchannels have dimensions of {approx}0.5 to {approx}25 {mu}m, with aspect ratios up to 300, and have the dimensional precision and absence of interstitial defects characteristic of photolithographic processing, compatible with positional matching to silicon electronics readouts. The open channel areal fraction and detection efficiency may exceed 90% on plates up to 300 mm in diameter. The resulting silicon substrates can be converted entirely to amorphous quartz (qMCP). The strip resistance and secondary emission are developed by controlled depositions of thin films, at temperatures up to 1200 deg. C, also compatible with high-temperature brazing, and can be essentially hydrogen, water and radionuclide-free. Novel secondary emitters and cesiated photocathodes can be high-temperature deposited or nucleated in the channels or the first strike surface. Results on resistivity, secondary emission and gain are presented.

  14. Silicon-micromachined microchannel plates

    Science.gov (United States)

    Beetz, Charles P.; Boerstler, Robert; Steinbeck, John; Lemieux, Bryan; Winn, David R.

    2000-03-01

    Microchannel plates (MCP) fabricated from standard silicon wafer substrates using a novel silicon micromachining process, together with standard silicon photolithographic process steps, are described. The resulting SiMCP microchannels have dimensions of ˜0.5 to ˜25 μm, with aspect ratios up to 300, and have the dimensional precision and absence of interstitial defects characteristic of photolithographic processing, compatible with positional matching to silicon electronics readouts. The open channel areal fraction and detection efficiency may exceed 90% on plates up to 300 mm in diameter. The resulting silicon substrates can be converted entirely to amorphous quartz (qMCP). The strip resistance and secondary emission are developed by controlled depositions of thin films, at temperatures up to 1200°C, also compatible with high-temperture brazing, and can be essentially hydrogen, water and radionuclide-free. Novel secondary emitters and cesiated photocathodes can be high-temperature deposited or nucleated in the channels or the first strike surface. Results on resistivity, secondary emission and gain are presented.

  15. Silicon-micromachined microchannel plates

    International Nuclear Information System (INIS)

    Beetz, Charles P.; Boerstler, Robert; Steinbeck, John; Lemieux, Bryan; Winn, David R.

    2000-01-01

    Microchannel plates (MCP) fabricated from standard silicon wafer substrates using a novel silicon micromachining process, together with standard silicon photolithographic process steps, are described. The resulting SiMCP microchannels have dimensions of ∼0.5 to ∼25 μm, with aspect ratios up to 300, and have the dimensional precision and absence of interstitial defects characteristic of photolithographic processing, compatible with positional matching to silicon electronics readouts. The open channel areal fraction and detection efficiency may exceed 90% on plates up to 300 mm in diameter. The resulting silicon substrates can be converted entirely to amorphous quartz (qMCP). The strip resistance and secondary emission are developed by controlled depositions of thin films, at temperatures up to 1200 deg. C, also compatible with high-temperature brazing, and can be essentially hydrogen, water and radionuclide-free. Novel secondary emitters and cesiated photocathodes can be high-temperature deposited or nucleated in the channels or the first strike surface. Results on resistivity, secondary emission and gain are presented

  16. Dual axis operation of a micromachined rate gyroscope

    Energy Technology Data Exchange (ETDEWEB)

    Juneau, T. [BSAC, Berkeley, CA (United States); Pisano, A.P. [Univ. California, Berkeley, CA (United States). Dept. of Mechanical Engineering; Smith, J. [Sandia National Lab., Albuquerque, NM (United States)

    1997-04-01

    Since micromachining technology has raised the prospect of fabricating high performance sensors without the associated high cost and large size, many researchers have investigated micromachined rate gyroscopes. The vast majority of research has focused on single input axis rate gyroscopes, but this paper presents work on a dual input axis micromachined rate gyroscope. The key to successful simultaneous dual axis operation is the quad symmetry of the circular oscillating rotor design. Untuned gyroscopes with mismatched modes yielded random walk as low as 10{degrees}/{radical}hour with cross sensitivity ranging from 6% to 16%. Mode frequency matching via electrostatic tuning allowed performance better than 2{degrees}/{radical}hour, but at the expense of excessive cross sensitivity.

  17. Capacitive micromachined ultrasonic transducer based tilt sensing

    Science.gov (United States)

    Yu, Hongbin; Guo, Bin; Haridas, Kuruveettil; Lin, Tsu-Hui; Hao Cheong, Jia; Lin Tsai, Ming; Boon Yee, Tack

    2012-10-01

    In this paper, a tilt sensing mechanism based on the capacitive micromachined ultrasound transducers (CMUTs) is presented. By measuring the difference in the time of flight of various pulse-echo signals from different CMUT transmitting elements to one common receiving element in the oil bath, the tilt angle of the oil surface can be determined. With the proposed device, the maximum tilt angles of 20° and 28° have been measured in the clockwise and counterclockwise directions, respectively, and the difference between the measured and the theoretical values of the tilt angle was found to be within 0.05° during the whole test.

  18. Modeling Grinding Processes as Micro-Machining Operation ...

    African Journals Online (AJOL)

    A computational based model for surface grinding process as a micro-machined operation has been developed. In this model, grinding forces are made up of chip formation force and sliding force. Mathematical expressions for Modeling tangential grinding force and normal grinding force were obtained. The model was ...

  19. Fission Surface Power Technology Development Status

    Science.gov (United States)

    Palac, Donald T.; Mason, Lee S.; Houts, Michael G.; Harlow, Scott

    2010-01-01

    Power is a critical consideration in planning exploration of the surfaces of the Moon, Mars, and beyond. Nuclear power is an important option, especially for locations in the solar system where sunlight is limited in availability or intensity. NASA is maintaining the option for fission surface power for the Moon and Mars by developing and demonstrating technology for an affordable fission surface power system. Because affordability drove the determination of the system concept that this technology will make possible, low development and recurring costs result, while required safety standards are maintained. However, an affordable approach to fission surface power also provides the benefits of simplicity, robustness, and conservatism in design. This paper will illuminate the multiplicity of benefits to an affordable approach to fission surface power, and will describe how the foundation for these benefits is being developed and demonstrated in the Exploration Technology Development Program s Fission Surface Power Project.

  20. Electron beam micromachining of plastics

    Czech Academy of Sciences Publication Activity Database

    Dupák, Libor

    2014-01-01

    Roč. 49, 5-6 (2014), s. 310-314 ISSN 0861-4717 R&D Projects: GA MŠk(CZ) LO1212; GA MŠk ED0017/01/01; GA MŠk EE.2.3.20.0103 Institutional support: RVO:68081731 Keywords : micromachining of plastics * Electron beam Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

  1. Fission Surface Power Technology Development Status

    Science.gov (United States)

    Palac, Donald T.; Mason, Lee S.; Harlow, Scott

    2009-01-01

    With the potential future deployment of a lunar outpost there is expected to be a clear need for a high-power, lunar surface power source to support lunar surface operations independent of the day-night cycle, and Fission Surface Power (FSP) is a very effective solution for power levels above a couple 10 s of kWe. FSP is similarly enabling for the poorly illuminated surface of Mars. The power levels/requirements for a lunar outpost option are currently being studied, but it is known that cost is clearly a predominant concern to decision makers. This paper describes the plans of NASA and the DOE to execute an affordable fission surface power system technology development project to demonstrate sufficient technology readiness of an affordable FSP system so viable and cost-effective FSP system options will be available when high power lunar surface system choices are expected to be made in the early 2010s.

  2. Micromachined Ultrasonic Transducers for 3-D Imaging

    DEFF Research Database (Denmark)

    Christiansen, Thomas Lehrmann

    of state-of-the-art 3-D ultrasound systems. The focus is on row-column addressed transducer arrays. This previously sparsely investigated addressing scheme offers a highly reduced number of transducer elements, resulting in reduced transducer manufacturing costs and data processing. To produce...... such transducer arrays, capacitive micromachined ultrasonic transducer (CMUT) technology is chosen for this project. Properties such as high bandwidth and high design flexibility makes this an attractive transducer technology, which is under continuous development in the research community. A theoretical...... capable of producing 62+62-element row-column addressed CMUT arrays with negligible charging issues. The arrays include an integrated apodization, which reduces the ghost echoes produced by the edge waves in such arrays by 15:8 dB. The acoustical cross-talk is measured on fabricated arrays, showing a 24 d...

  3. Micromachined thin-film sensors for SOI-CMOS co-integration

    CERN Document Server

    Laconte, Jean; Raskin, Jean-Pierre

    2006-01-01

    Co-integration of MEMS and MOS in SOI technology is promising and well demonstrated hereThe impact of Micromachining on SOI devices is deeply analyzed for the first timeInclude extensive TMAH etching, residual stress, microheaters, gas-flow sensors reviewResidual stresses in thin films need to be more and more monitored in MEMS designsTMAH micromachining is an attractive alternative to KOH.

  4. Lunar Surface Systems Supportability Technology Development Roadmap

    Science.gov (United States)

    Oeftering, Richard C.; Struk, Peter M.; Green, Jennifer L.; Chau, Savio N.; Curell, Philip C.; Dempsey, Cathy A.; Patterson, Linda P.; Robbins, William; Steele, Michael A.; DAnnunzio, Anthony; hide

    2011-01-01

    The Lunar Surface Systems Supportability Technology Development Roadmap is a guide for developing the technologies needed to enable the supportable, sustainable, and affordable exploration of the Moon and other destinations beyond Earth. Supportability is defined in terms of space maintenance, repair, and related logistics. This report considers the supportability lessons learned from NASA and the Department of Defense. Lunar Outpost supportability needs are summarized, and a supportability technology strategy is established to make the transition from high logistics dependence to logistics independence. This strategy will enable flight crews to act effectively to respond to problems and exploit opportunities in an environment of extreme resource scarcity and isolation. The supportability roadmap defines the general technology selection criteria. Technologies are organized into three categories: diagnostics, test, and verification; maintenance and repair; and scavenge and recycle. Furthermore, "embedded technologies" and "process technologies" are used to designate distinct technology types with different development cycles. The roadmap examines the current technology readiness level and lays out a four-phase incremental development schedule with selection decision gates. The supportability technology roadmap is intended to develop technologies with the widest possible capability and utility while minimizing the impact on crew time and training and remaining within the time and cost constraints of the program.

  5. Laser Micromachining of Glass, Silicon, and Ceramics

    Directory of Open Access Journals (Sweden)

    L. Rihakova

    2015-01-01

    Full Text Available A brief review is focused on laser micromachining of materials. Micromachining of materials is highly widespread method used in many industries, including semiconductors, electronic, medical, and automotive industries, communication, and aerospace. This method is a promising tool for material processing with micron and submicron resolution. In this paper micromachining of glass, silicon, and ceramics is considered. Interaction of these materials with laser radiation and recent research held on laser material treatment is provided.

  6. Fission Surface Power Technology Development Update

    Science.gov (United States)

    Palac, Donald T.; Mason, Lee S.; Houts, Michael G.; Harlow, Scott

    2011-01-01

    Power is a critical consideration in planning exploration of the surfaces of the Moon, Mars, and places beyond. Nuclear power is an important option, especially for locations in the solar system where sunlight is limited or environmental conditions are challenging (e.g., extreme cold, dust storms). NASA and the Department of Energy are maintaining the option for fission surface power for the Moon and Mars by developing and demonstrating technology for a fission surface power system. The Fission Surface Power Systems project has focused on subscale component and subsystem demonstrations to address the feasibility of a low-risk, low-cost approach to space nuclear power for surface missions. Laboratory demonstrations of the liquid metal pump, reactor control drum drive, power conversion, heat rejection, and power management and distribution technologies have validated that the fundamental characteristics and performance of these components and subsystems are consistent with a Fission Surface Power preliminary reference concept. In addition, subscale versions of a non-nuclear reactor simulator, using electric resistance heating in place of the reactor fuel, have been built and operated with liquid metal sodium-potassium and helium/xenon gas heat transfer loops, demonstrating the viability of establishing system-level performance and characteristics of fission surface power technologies without requiring a nuclear reactor. While some component and subsystem testing will continue through 2011 and beyond, the results to date provide sufficient confidence to proceed with system level technology readiness demonstration. To demonstrate the system level readiness of fission surface power in an operationally relevant environment (the primary goal of the Fission Surface Power Systems project), a full scale, 1/4 power Technology Demonstration Unit (TDU) is under development. The TDU will consist of a non-nuclear reactor simulator, a sodium-potassium heat transfer loop, a power

  7. Biasing of Capacitive Micromachined Ultrasonic Transducers.

    Science.gov (United States)

    Caliano, Giosue; Matrone, Giulia; Savoia, Alessandro Stuart

    2017-02-01

    Capacitive micromachined ultrasonic transducers (CMUTs) represent an effective alternative to piezoelectric transducers for medical ultrasound imaging applications. They are microelectromechanical devices fabricated using silicon micromachining techniques, developed in the last two decades in many laboratories. The interest for this novel transducer technology relies on its full compatibility with standard integrated circuit technology that makes it possible to integrate on the same chip the transducers and the electronics, thus enabling the realization of extremely low-cost and high-performance devices, including both 1-D or 2-D arrays. Being capacitive transducers, CMUTs require a high bias voltage to be properly operated in pulse-echo imaging applications. The typical bias supply residual ripple of high-quality high-voltage (HV) generators is in the millivolt range, which is comparable with the amplitude of the received echo signals, and it is particularly difficult to minimize. The aim of this paper is to analyze the classical CMUT biasing circuits, highlighting the features of each one, and to propose two novel HV generator architectures optimized for CMUT biasing applications. The first circuit proposed is an ultralow-residual ripple (CMUT by charging a buffer capacitor synchronously with the pulsing sequence, thus reducing the impact of the switching noise on the received echo signals. The small area of the circuit (about 1.5 cm 2 ) makes it possible to generate the bias voltage inside the probe, very close to the CMUT, making the proposed solution attractive for portable applications. Measurements and experiments are shown to demonstrate the effectiveness of the new approaches presented.

  8. Fabrication of a novel quartz micromachined gyroscope

    Directory of Open Access Journals (Sweden)

    Liqiang Xie

    2015-04-01

    Full Text Available A novel quartz micromachined gyroscope is proposed in this paper. The novel gyroscope is realized by quartz anisotropic wet etching and 3-dimensional electrodes deposition. In the quartz wet etching process, the quality of Cr/Au mask films affecting the process are studied by experiment. An excellent mask film with 100 Å Cr and 2000 Å Au is achieved by optimization of experimental parameters. Crystal facets after etching seriously affect the following sidewall electrodes deposition process and the structure’s mechanical behaviours. Removal of crystal facets is successfully implemented by increasing etching time based on etching rate ratios between facets and crystal planes. In the electrodes deposition process, an aperture mask evaporation method is employed to prepare electrodes on 3-dimensional surfaces of the gyroscope structure. The alignments among the aperture masks are realized by the ABM™ Mask Aligner System. Based on the processes described above, a z–axis quartz gyroscope is fabricated successfully.

  9. Analysis and prediction of dimensions and cost of laser micro-machining internal channel fabrication process

    Directory of Open Access Journals (Sweden)

    Brabazon D.

    2010-06-01

    Full Text Available This paper presents the utilisation of Response Surface Methodology (RSM as the prediction tool for the laser micro-machining process. Laser internal microchannels machined using pulsed Nd:YVO4 laser in polycarbonate were investigated. The experiments were carried out according to 33 factorial Design of Experiment (DoE. In this work the three input process set as control parameters were laser power, P; pulse repetition frequency, PRF; and sample translation speed, U. Measured responses were the channel width and the micro-machining operating cost per metre of produced microchannels. The responses were sufficiently predicted within the set micro-machining parameters limits. Two factorial interaction (2FI and quadratic polynomial regression equations for both responses were constructed. It is proposed that the developed prediction equations can be used to find locally optimal micro-machining process parameters under experimental and operational conditions.

  10. Silicon micromachining using a high-density plasma source

    International Nuclear Information System (INIS)

    McAuley, S.A.; Ashraf, H.; Atabo, L.; Chambers, A.; Hall, S.; Hopkins, J.; Nicholls, G.

    2001-01-01

    Dry etching of Si is critical in satisfying the demands of the micromachining industry. The micro-electro-mechanical systems (MEMS) community requires etches capable of high aspect ratios, vertical profiles, good feature size control and etch uniformity along with high throughput to satisfy production requirements. Surface technology systems' (STS's) high-density inductively coupled plasma (ICP) etch tool enables a wide range of applications to be realized whilst optimizing the above parameters. Components manufactured from Si using an STS ICP include accelerometers and gyroscopes for military, automotive and domestic applications. STS's advanced silicon etch (ASE TM ) has also allowed the first generation of MEMS-based optical switches and attenuators to reach the marketplace. In addition, a specialized application for fabricating the next generation photolithography exposure masks has been optimized for 200 mm diameter wafers, to depths of ∼750 μm. Where the profile is not critical, etch rates of greater than 8 μm min -1 have been realized to replace previous methods such as wet etching. This is also the case for printer applications. Specialized applications that require etching down to pyrex or oxide often result in the loss of feature size control at the interface; this is an industry wide problem. STS have developed a technique to address this. The rapid progression of the industry has led to development of the STS ICP etch tool, as well as the process. (author)

  11. Fabrication of Super Hydrophobic Surfaces by fs Laser Pulses : How to Produce Self-Cleaning Surfaces

    NARCIS (Netherlands)

    Groenendijk, M.N.W.

    2008-01-01

    The chair of Applied Laser Technology of the University of Twente, The Netherlands, is performing research into applications of ultrashort pulsed lasers for micromachining. In a recent project, PhD student Max Groenendijk developed a method for the production of super water repellant surfaces by

  12. Micro-machined calorimetric biosensors

    Science.gov (United States)

    Doktycz, Mitchel J.; Britton, Jr., Charles L.; Smith, Stephen F.; Oden, Patrick I.; Bryan, William L.; Moore, James A.; Thundat, Thomas G.; Warmack, Robert J.

    2002-01-01

    A method and apparatus are provided for detecting and monitoring micro-volumetric enthalpic changes caused by molecular reactions. Micro-machining techniques are used to create very small thermally isolated masses incorporating temperature-sensitive circuitry. The thermally isolated masses are provided with a molecular layer or coating, and the temperature-sensitive circuitry provides an indication when the molecules of the coating are involved in an enthalpic reaction. The thermally isolated masses may be provided singly or in arrays and, in the latter case, the molecular coatings may differ to provide qualitative and/or quantitative assays of a substance.

  13. Micromachined chemical jet dispenser

    Science.gov (United States)

    Swierkowski, S.P.

    1999-03-02

    A dispenser is disclosed for chemical fluid samples that need to be precisely ejected in size, location, and time. The dispenser is a micro-electro-mechanical systems (MEMS) device fabricated in a bonded silicon wafer and a substrate, such as glass or silicon, using integrated circuit-like fabrication technology which is amenable to mass production. The dispensing is actuated by ultrasonic transducers that efficiently produce a pressure wave in capillaries that contain the chemicals. The 10-200 {micro}m diameter capillaries can be arranged to focus in one spot or may be arranged in a larger dense linear array (ca. 200 capillaries). The dispenser is analogous to some ink jet print heads for computer printers but the fluid is not heated, thus not damaging certain samples. Major applications are in biological sample handling and in analytical chemical procedures such as environmental sample analysis, medical lab analysis, or molecular biology chemistry experiments. 4 figs.

  14. Micro-machined resonator oscillator

    Science.gov (United States)

    Koehler, Dale R.; Sniegowski, Jeffry J.; Bivens, Hugh M.; Wessendorf, Kurt O.

    1994-01-01

    A micro-miniature resonator-oscillator is disclosed. Due to the miniaturization of the resonator-oscillator, oscillation frequencies of one MHz and higher are utilized. A thickness-mode quartz resonator housed in a micro-machined silicon package and operated as a "telemetered sensor beacon" that is, a digital, self-powered, remote, parameter measuring-transmitter in the FM-band. The resonator design uses trapped energy principles and temperature dependence methodology through crystal orientation control, with operation in the 20-100 MHz range. High volume batch-processing manufacturing is utilized, with package and resonator assembly at the wafer level. Unique design features include squeeze-film damping for robust vibration and shock performance, capacitive coupling through micro-machined diaphragms allowing resonator excitation at the package exterior, circuit integration and extremely small (0.1 in. square) dimensioning. A family of micro-miniature sensor beacons is also disclosed with widespread applications as bio-medical sensors, vehicle status monitors and high-volume animal identification and health sensors. The sensor family allows measurement of temperatures, chemicals, acceleration and pressure. A microphone and clock realization is also available.

  15. Micromachined Thermal Flow Sensors—A Review

    Directory of Open Access Journals (Sweden)

    Jonathan T. W. Kuo

    2012-07-01

    Full Text Available Microfabrication has greatly matured and proliferated in use amongst many disciplines. There has been great interest in micromachined flow sensors due to the benefits of miniaturization: low cost, small device footprint, low power consumption, greater sensitivity, integration with on-chip circuitry, etc. This paper reviews the theory of thermal flow sensing and the different configurations and operation modes available. Material properties relevant to micromachined thermal flow sensing and selection criteria are also presented. Finally, recent applications of micromachined thermal flow sensors are presented. Detailed tables of the reviewed devices are included.

  16. High lane density slab-gel electrophoresis using micromachined instrumentation.

    Science.gov (United States)

    Papautsky, I; Mohanty, S; Weiss, R; Frazier, A B

    2001-10-01

    In this paper, micromachined pipette arrays (MPAs) and microcombs were studied as a means of enabling high lane density gel electrophoresis. The MPA provide a miniaturized format to interface sub-microliter volumes of samples between macroscale sample preparation formats and microscale biochemical analysis systems. The microcombs provide a means of creating sample loading wells in the gel material on the same center-to-center spacing as the MPAs. Together, the two micromachined instruments provide an alternative to current combs and pipetting technologies used for creating sample loading wells and sample delivery in gel electrophoresis systems. Using three designs for the microcomb-MPA pair, center-to-center spacings of 1.0 mm, 500 microm, and 250 microm are studied. The results demonstrate an approximate 10-fold increase in lane density and a 10-fold reduction in sample size from 5 microL to 500 pL. As a result, the number of theoretical plates has increased 2.5-fold, while system resolution has increased 1.5-fold over the conventional agarose gel systems. An examination of changes in resolution across the width of individual separation lanes in both systems revealed dependence in the case of the conventional gels and no dependence for the gels loaded with the micromachined instrumentation.

  17. New developments in surface technology and prototyping

    Science.gov (United States)

    Himmer, Thomas; Beyer, Eckhard

    2003-03-01

    Novel lightweight applications in the automotive and aircraft industries require advanced materials and techniques for surface protection as well as direct and rapid manufacturing of the related components and tools. The manufacturing processes presented in this paper are based on multiple additive and subtractive technologies such as laser cutting, laser welding, direct laser metal deposition, laser/plasma hybrid spraying technique or CNC milling. The process chain is similar to layer-based Rapid Prototyping Techniques. In the first step, the 3D CAD geometry is sliced into layers by a specially developed software. These slices are cut by high speed laser cutting and then joined together. In this way laminated tools or parts are built. To improve surface quality and to increase wear resistance a CNC machining center is used. The system consists of a CNC milling machine, in which a 3 kW Nd:YAG laser, a coaxial powder nozzle and a digitizing system are integrated. Using a new laser/plasma hybrid spraying technique, coatings can be deposited onto parts for surface protection. The layers show a low porosity and high adhesion strength, the thickness is up to 0.3 mm, and the lower effort for preliminary surface preparation reduces time and costs of the whole process.

  18. Micromachined Integrated Transducers for Ultrasound Imaging

    DEFF Research Database (Denmark)

    la Cour, Mette Funding

    The purpose of this project is to develop capacitive micromachined ultrasonic transducers (CMUTs) for medical imaging. Medical ultrasound transducers used today are fabricated using piezoelectric materials and bulk processing. To fabricate transducers capable of delivering a higher imaging...

  19. Development of a micromachined electrostatically suspended gyroscope

    OpenAIRE

    Damrongsak, Badin

    2009-01-01

    In this thesis, a new approach based on an electrostatically suspended gyroscope (ESG) was explored in order to improve the performance of micromachined gyroscopes. Typically, a conventional micromachined gyroscope consists of a vibrating mass suspended on elastic beams that are anchored to a substrate. It measures the rotation rate of a body of interest by detecting rotation-induced Coriolis acceleration of a vibrating structure. Such a gyro is sensitive to fabrication imperfections an...

  20. SummitView 1.0: a code to automatically generate 3D solid models of surface micro-machining based MEMS designs.

    Energy Technology Data Exchange (ETDEWEB)

    McBride, Cory L. (Elemental Technologies, American Fort, UT); Yarberry, Victor R.; Schmidt, Rodney Cannon; Meyers, Ray J. (Elemental Technologies, American Fort, UT)

    2006-11-01

    This report describes the SummitView 1.0 computer code developed at Sandia National Laboratories. SummitView is designed to generate a 3D solid model, amenable to visualization and meshing, that represents the end state of a microsystem fabrication process such as the SUMMiT (Sandia Ultra-Planar Multilevel MEMS Technology) V process. Functionally, SummitView performs essentially the same computational task as an earlier code called the 3D Geometry modeler [1]. However, because SummitView is based on 2D instead of 3D data structures and operations, it has significant speed and robustness advantages. As input it requires a definition of both the process itself and the collection of individual 2D masks created by the designer and associated with each of the process steps. The definition of the process is contained in a special process definition file [2] and the 2D masks are contained in MEM format files [3]. The code is written in C++ and consists of a set of classes and routines. The classes represent the geometric data and the SUMMiT V process steps. Classes are provided for the following process steps: Planar Deposition, Planar Etch, Conformal Deposition, Dry Etch, Wet Etch and Release Etch. SummitView is built upon the 2D Boolean library GBL-2D [4], and thus contains all of that library's functionality.

  1. Acoustic lens for capacitive micromachined ultrasonic transducers

    Science.gov (United States)

    Chang, Chienliu; Firouzi, Kamyar; Park, Kwan Kyu; Sarioglu, Ali Fatih; Nikoozadeh, Amin; Yoon, Hyo-Seon; Vaithilingam, Srikant; Carver, Thomas; Khuri-Yakub, Butrus T.

    2014-08-01

    Capacitive micromachined ultrasonic transducers (CMUTs) have great potential to compete with traditional piezoelectric transducers in therapeutic ultrasound applications. In this paper we have designed, fabricated and developed an acoustic lens formed on the CMUT to mechanically focus ultrasound. The acoustic lens was designed based on the paraxial theory and made of silicone rubber for acoustic impedance matching and encapsulation. The CMUT was fabricated based on the local oxidation of silicon (LOCOS) and fusion-bonding. The fabricated CMUT was verified to behave like an electromechanical resonator in air and exhibited wideband response with a center frequency of 2.2 MHz in immersion. The fabrication for the acoustic lens contained two consecutive mold castings and directly formed on the surface of the CMUT. Applied with ac burst input voltages at the center frequency, the CMUT with the acoustic lens generated an output pressure of 1.89 MPa (peak-to-peak) at the focal point with an effective focal gain of 3.43 in immersion. Compared to the same CMUT without a lens, the CMUT with the acoustic lens demonstrated the ability to successfully focus ultrasound and provided a viable solution to the miniaturization of the multi-modality forward-looking endoscopes without electrical focusing.

  2. Acoustic lens for capacitive micromachined ultrasonic transducers

    International Nuclear Information System (INIS)

    Chang, Chienliu; Firouzi, Kamyar; Sarioglu, Ali Fatih; Nikoozadeh, Amin; Yoon, Hyo-Seon; Vaithilingam, Srikant; Carver, Thomas; Khuri-Yakub, Butrus T; Kyu Park, Kwan

    2014-01-01

    Capacitive micromachined ultrasonic transducers (CMUTs) have great potential to compete with traditional piezoelectric transducers in therapeutic ultrasound applications. In this paper we have designed, fabricated and developed an acoustic lens formed on the CMUT to mechanically focus ultrasound. The acoustic lens was designed based on the paraxial theory and made of silicone rubber for acoustic impedance matching and encapsulation. The CMUT was fabricated based on the local oxidation of silicon (LOCOS) and fusion-bonding. The fabricated CMUT was verified to behave like an electromechanical resonator in air and exhibited wideband response with a center frequency of 2.2 MHz in immersion. The fabrication for the acoustic lens contained two consecutive mold castings and directly formed on the surface of the CMUT. Applied with ac burst input voltages at the center frequency, the CMUT with the acoustic lens generated an output pressure of 1.89 MPa (peak-to-peak) at the focal point with an effective focal gain of 3.43 in immersion. Compared to the same CMUT without a lens, the CMUT with the acoustic lens demonstrated the ability to successfully focus ultrasound and provided a viable solution to the miniaturization of the multi-modality forward-looking endoscopes without electrical focusing. (paper)

  3. Micromachining Lithium Niobate for Rapid Prototyping of Resonant Biosensors

    International Nuclear Information System (INIS)

    Al-Shibaany, Zeyad Yousif Abdoon; Hedley, John; Huo, Dehong; Hu, Zhongxu

    2014-01-01

    Lithium niobate material is widely used in MEMS application due to its piezoelectric properties. This paper presents the micromachining process of lithium niobate to rapid prototype a resonant biosensor design. A high precision CNC machine was used to machine a sample of lithium niobate material at 5 different spindle speeds to find out the best conditions to machine this brittle material. A qualitative visual check of the surface was performed by using scanning electron microscopy, surface roughness was quantitatively investigated using an optical surface profiler and Raman spectroscopy to check the strain of the surface. Results show that the surface quality of the lithium niobate was significantly affected by the spindle speed with optimum conditions at 70k rpm giving a strained surface with 500 nm rms roughness

  4. Acoustic mode converters micromachined in silicon by proton beam writing

    International Nuclear Information System (INIS)

    Scholz, U.; Menzel, F.; Pluta, M.; Grill, W.; Butz, T.

    2011-01-01

    Proton beam writing is a powerful tool for the production of microstructures for acoustic applications because it allows to create structures inclined to the original sample surface which therefore can act as acoustic mode converters. We report on experiments, finding optimal structure sizes in p-type 12 Ω cm silicon for this purpose. For the creation of the structures the proton beam at the LIPSION laboratory was used. Furthermore, by investigating the micromachined silicon with a phase sensitive acoustic microscope we give evidence that inclined structures such as rods and walls can be used to change the mode of acoustic waves in the crystal.

  5. Physics-based signal processing algorithms for micromachined cantilever arrays

    Science.gov (United States)

    Candy, James V; Clague, David S; Lee, Christopher L; Rudd, Robert E; Burnham, Alan K; Tringe, Joseph W

    2013-11-19

    A method of using physics-based signal processing algorithms for micromachined cantilever arrays. The methods utilize deflection of a micromachined cantilever that represents the chemical, biological, or physical element being detected. One embodiment of the method comprises the steps of modeling the deflection of the micromachined cantilever producing a deflection model, sensing the deflection of the micromachined cantilever and producing a signal representing the deflection, and comparing the signal representing the deflection with the deflection model.

  6. Characterization and modeling of 2D-glass micro-machining by spark-assisted chemical engraving (SACE) with constant velocity

    International Nuclear Information System (INIS)

    Didar, Tohid Fatanat; Dolatabadi, Ali; Wüthrich, Rolf

    2008-01-01

    Spark-assisted chemical engraving (SACE) is an unconventional micro-machining technology based on electrochemical discharge used for micro-machining nonconductive materials. SACE 2D micro-machining with constant speed was used to machine micro-channels in glass. Parameters affecting the quality and geometry of the micro-channels machined by SACE technology with constant velocity were presented and the effect of each of the parameters was assessed. The effect of chemical etching on the geometry of micro-channels under different machining conditions has been studied, and a model is proposed for characterization of the micro-channels as a function of machining voltage and applied speed

  7. Fly's proprioception-inspired micromachined strain-sensing structure: idea, design, modeling and simulation, and comparison with experimental results

    Science.gov (United States)

    Wicaksono, D. H. B.; Zhang, L.-J.; Pandraud, G.; French, P. J.; Vincent, J. F. V.

    2006-04-01

    A new strain-sensing structure inspired from insect's (especially the Fly) propricoception sensor is devised. The campaniform sensillum is a strain-sensing microstructure with very high sensitivity despite its small dimension (diameter ~10 µm in a relatively stiff material of insect's exocuticle (E = ~109 Pa). Previous work shows that the high sensitivity of this structure towards strain is due to its membrane-in-recess- and strainconcentrating- hole- features. Based on this inspiration, we built similar structure using silicon micromachining technology. Then a simple characterisation setup was devised. Here, we present briefly, finite-element modeling and simulation based on this actual sample preparation for the characterisation. As comparison and also to understand mechanical features responsible for the strain-sensitivity, we performed the modeling on different mechanical structures: bulk chunk, blind-hole, thorugh-hole, surface membrane, and membrane-in-recess. The actual experimental characterisation was performed previously using optical technique to membranein- recess micromachined Si structure. The FEM simulation results confirm that the bending stress and strain are concentrated in the hole-vicinity. The membrane inside the hole acts as displacement transducer. The FEM is in conformity with previous analytical results, as well as the optical characterisation result. The end goal is to build a new type MEMS strain sensor.

  8. Micromachined gyroscopes: challenges, design solutions, and opportunities

    Science.gov (United States)

    Shkel, Andrei M.

    2001-08-01

    Micromachined gyroscopes are probably the most challenging type of transducers ever attempted to be designed in micro-world. A nail-size dynamic system integrated with control electronics on the same silicon chip is designed to be a very sensitive sensor which is potentially able to detect maneuvers and motions beyond human perception. Along with exciting opportunities which MEMS gyroscopes could bring to everyday life, the miniaturization introduces many new technical challenges. Multi-degree of freedom dynamics, sensitivity to fabrication imperfections, dynamic instability, limited control resources - all these raise a number of fundamentally challenging issues in the design, analysis, and control of micromachined gyroscopes. In this paper, we summarize principles of operation, review recent research and development efforts, and discuss potential applications and the future market of silicon based micromachined gyroscopes.

  9. Surface cleaning in thin film technology

    International Nuclear Information System (INIS)

    Mattox, D.M.

    1978-01-01

    A ''clean surface'' is one that contains no significant amounts of undesirable material. This paper discusses the types and origin of various contaminants. Since cleaning is often equated with adhesion, the mechanisms of adhesion to oxide, metal, and organic surfaces are reviewed and cleaning processes for these surfaces are outlined. Techniques for monitoring surface cleaning are presented, and the importance of storage of clean surfaces is discussed. An extensive bibliography is given. 4 figs., 89 references

  10. Exploration Technology Development including Surface Acoustic Wave RFID chips

    Data.gov (United States)

    National Aeronautics and Space Administration — This project is focused on maturing future surface exploration technologies and instrumentation and working towards flight instrumentation and systems to support...

  11. Simulation and optimization of a micromachined gyroscope using high-aspect-ratio micromachining fabrication process

    Science.gov (United States)

    Ruan, Aiwu Y.; Tse, Man S.; Chong, Gang Y.

    2001-11-01

    Micromachined gyroscopes rely on tuned vibration mode frequencies to measure rotation rates and typically have complex modes of vibration for the mechanical microstructures. Although there are many reports on how to exactly tune the drive and sense modes of vibration to maximize sensitivity of micromachined gyroscope, there are only few reports on the detailed analysis of modes of vibration. Modes of vibration are strongly dependent on the design parameters of the mechanical structure of the gyroscope including the dimension of the proof mass, types and dimensions of the suspension, and residual mechanical stress of the high aspect-ratio polysilicon film used to form the microstructures of the micromachined gyroscope. In this paper, an electrostatic drive and capacitive sense in-plane decoupled gyroscope for measuring vertical angular velocity is proposed to study the effects of the geometrical variables on modes of vibration. Finite-element analysis (FEA) simulation was performed on simplifiedmodel of the in-plane decoupled micromachined gyroscope microstructure. For optimal result the drive-mode and sense-mode suspensions of the micromachined gyroscope should be fabricated from thick polysilicon microstructure to give large aspect ratio suspension systems for the in-plane decoupled micromachined gyroscope. Folded-beam suspension design is recommended for the drive-mode suspension in order to relieve the residual stress of the thick polysilicon film for high aspect-ratio micromachine dgyroscope. It is critical to control the process variations of the suspension beam dimension, especially the beam width variation in order to achieve the goal of accurately control resonant frequencies of micromachined gyrocope.

  12. Micromachined glass chips for ion analysis

    NARCIS (Netherlands)

    Gardeniers, Johannes G.E.; Mulder, Micha; Lüttge, Regina; van den Berg, Albert

    2002-01-01

    This article describes recent developments at Micronit Microfluidics B.V. and MESA+ in the field of "Lab-on-a-chip" systems for ion analysis. Glass chips with typical micromachined channel geometries for capillary electrophoresis and integrated conductivity detection were developed, with which

  13. A review on technologies for oil shale surface retort

    International Nuclear Information System (INIS)

    Pan, Y.; Zhang, X.; Liu, S.; Yang, S.A.; Ren, N.

    2012-01-01

    In recent years, with the shortage of oil resources and the continuous increase in oil prices, oil shale has seized much more attention. Oil shale is a kind of important unconventional oil and gas resources. Oil shale resources are plentiful according to the proven reserves in places. And shale oil is far richer than crude oil in the world. Technology processing can be divided into two categories: surface retorting and in-situ technology. The process and equipment of surface retorting are more mature, and are still up to now, the main way to produce shale oil from oil shale. According to the variations of the particle size, the surface retorting technologies of oil shale can be notified and classified into two categories such as lump shale process and particulate shale process. The lump shale processes introduced in this article include the Fushun retorting technology, the Kiviter technology and the Petrosix technology; the particulate processes include the Gloter technology, the LR technology, the Tosco-II technology, the ATP (Alberta Taciuk Process) technology and the Enefit-280 technology. After the thorough comparison of these technologies, we can notice that, this article aim is to show off that : the particulate process that is environmentally friendly, with its low cost and high economic returns characteristics, will be the major development trend; Combined technologies of surface retorting technology and other oil producing technology should be developed; the comprehensive utilization of oil shale should be considered during the development of surface retorting technology, meanwhile the process should be harmless to the environment. (author)

  14. Eye Vision Testing System and Eyewear Using Micromachines

    Directory of Open Access Journals (Sweden)

    Nabeel A. Riza

    2015-11-01

    Full Text Available Proposed is a novel eye vision testing system based on micromachines that uses micro-optic, micromechanic, and microelectronic technologies. The micromachines include a programmable micro-optic lens and aperture control devices, pico-projectors, Radio Frequency (RF, optical wireless communication and control links, and energy harvesting and storage devices with remote wireless energy transfer capabilities. The portable lightweight system can measure eye refractive powers, optimize light conditions for the eye under testing, conduct color-blindness tests, and implement eye strain relief and eye muscle exercises via time sequenced imaging. A basic eye vision test system is built in the laboratory for near-sighted (myopic vision spherical lens refractive error correction. Refractive error corrections from zero up to −5.0 Diopters and −2.0 Diopters are experimentally demonstrated using the Electronic-Lens (E-Lens and aperture control methods, respectively. The proposed portable eye vision test system is suited for children’s eye tests and developing world eye centers where technical expertise may be limited. Design of a novel low-cost human vision corrective eyewear is also presented based on the proposed aperture control concept. Given its simplistic and economical design, significant impact can be created for humans with vision problems in the under-developed world.

  15. Plasma technology of the surface polymer activation

    International Nuclear Information System (INIS)

    Dutra, Jorge C.N.; Mello, Sandra C.; Massi, Marcos; Otani, Choyu; Maciel, Homero S.; Bittencourt, Edison

    2005-01-01

    A number of polymers, especially rubbers, require surface treatment to achieve a satisfactory level of adhesion. The surface of EPDM rubber vulcanized is high hydrophobicity and is not suited for a number of potential applications, in particular, for adhering to the polyurethane liner of solid rocket propellants. In this case, plasma treatment can be a very attractive process because it can efficiently increase the surface energy attributed to surface oxidation with the introduction of polar groups 1, 2. In order to investigate the influence of the parameters on the modifications of the treated surface samples of EPDM rubber by plasma generated by gas oxygen and argon, the water and methylene iodide contact angles were measured at room temperature with an image analyzing using the sessile drop technique 3 - 6 . (author)

  16. Influence of micromachined targets on laser accelerated proton beam profiles

    Science.gov (United States)

    Dalui, Malay; Permogorov, Alexander; Pahl, Hannes; Persson, Anders; Wahlström, Claes-Göran

    2018-03-01

    High intensity laser-driven proton acceleration from micromachined targets is studied experimentally in the target-normal-sheath-acceleration regime. Conical pits are created on the front surface of flat aluminium foils of initial thickness 12.5 and 3 μm using series of low energy pulses (0.5–2.5 μJ). Proton acceleration from such micromachined targets is compared with flat foils of equivalent thickness at a laser intensity of 7 × 1019 W cm‑2. The maximum proton energy obtained from targets machined from 12.5 μm thick foils is found to be slightly lower than that of flat foils of equivalent remaining thickness, and the angular divergence of the proton beam is observed to increase as the depth of the pit approaches the foil thickness. Targets machined from 3 μm thick foils, on the other hand, show evidence of increasing the maximum proton energy when the depths of the structures are small. Furthermore, shallow pits on 3 μm thick foils are found to be efficient in reducing the proton beam divergence by a factor of up to three compared to that obtained from flat foils, while maintaining the maximum proton energy.

  17. Surface technologies 2006-Alternative energies and policy options

    International Nuclear Information System (INIS)

    Rose, Lars

    2007-01-01

    Surfaces are the immediate contact between anything in our world. Literally, every industry utilizes coatings and surface modifications in order to create surfaces tailored to specific needs, protect underlying substrates, or modify their behavior. Surface and coating technologies are essential to a large variety of different industrial sectors, including transportation, manufacturing, food and biomedical engineering, energy, resources, and materials science and technology. The present paper explains the limitations for alternative energy technologies, with a focus on fuel cell technology development and the alternative energy sector, based on the outcomes of presentations and facilitated discussion groups during a Canadian national workshop series. Options for technological improvements of alternative energy systems are presented in combination with national and international policy choices, which could positively influence research and development in the alternative energy sector

  18. FY 1992 Report on the results of the research and development of micromachine technologies. R and D of highly functional maintenance technologies for power generating systems; 1992 nendo micromachine gijutsu no kenkyu kaihatsu seika hokokusho. Hatsuden shisetsuyo kokino maintenance gijutsu kaihatsu

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1993-03-01

    Described herein are the FY 1992 results of the R and D project aimed at development of microcapsules, mother machines, examination modules without retrieval and working modules with retrieval, and their application to total systems for development of the highly functional maintenance technologies for power generating systems. Researches on the microgenerators involve studies and extraction of technical problems for structures, thin-film magnet production methods, coil winding methods, high-speed microbearings and microaccelerators. Researches on the mother machines involve development of the basic elements, on a trial basis, of the electrostatic actuators for the mechanisms of driving the main bodies, and evaluation of their characteristics by a minute torque analyzer. Researches on the examination modules without retrieval involve basic studies on, e.g., expansion driving, supersonic and microwave energy conversion devices for the expansion transfer mechanisms, development of these devices on a trial basis, evaluation of their functions, and extraction of the problems. Researches on the working modules with retrieval involve studies on shape memory alloy materials for tubular manipulators and actuator mechanisms. (NEDO)

  19. Micromachining of AlN and Al2O3 Using Fiber Laser

    Directory of Open Access Journals (Sweden)

    Florian Preusch

    2014-11-01

    Full Text Available We report on high precision high speed micromachining of Al2O3 and AlN using pulsed near infrared fiber laser. Ablation thresholds are determined to be 30 J/cm2 for alumina and 18 J/cm2 for aluminum nitride. The factors influencing the efficiency and quality of 3D micromachining, namely the surface roughness, the material removal rate and the ablation depth accuracy are determined as a function of laser repetition rate and pulse overlap. Using a fluence of 64 J/cm², we achieve a material removal rate of up to 94 mm³/h in Al2O3 and 135 mm³/h in AlN for high pulse overlaps (89% and 84%. A minimum roughness of 1.5 μm for alumina and 1.65 μm for aluminum nitride can be accomplished for medium pulse overlaps (42% to 56%. In addition, ablation depth deviation of the micromachining process of smaller than 8% for alumina and 2% for aluminum nitride are achieved. Based on these results, by structuring exemplarily 3D structures we demonstrate the potential of high quality and efficient 3D micromachining using pulsed fiber laser.

  20. Novel silicon fabrication process for high-aspect-ratio micromachined parts

    Energy Technology Data Exchange (ETDEWEB)

    Fleming, J.G.; Barron, C.C.

    1995-08-01

    Bulk micromachining generally refers to processes involving wet chemical etching of structures formed out of the silicon substrate and so is limited to fairly large, crude structures. Surface micromachining allows intricate patterning of thin films of polysilicon and other materials to form essentially two-dimensional layered parts (since the thickness of the parts is limited by the thickness of the deposited films). There is a third type of micromachining in which the part is formed by filling a mold which was defined by photolithographic means. Historically micromachining molds have been formed in some sort of photopolymer, be it with x-ray lithography (``LIGA``) or more conventional UV lithography, with the aim of producing piece parts. Recently, however, several groups including ours at Sandia have independently come up with the idea of forming the mold for mechanical parts by etching into the silicon substrate itself. In Sandia`s mold process, the mold is recessed into the substrate using a deep silicon trench etch, lined with a sacrificial or etch-stop layer, and then filled with any of a number of mechanical materials. The completed structures are not ejected from the mold to be used as piece parts rather, the mold is dissolved from around selected movable segments of the parts, leaving the parts anchored to the substrate. Since the mold is recessed into the substrate, the whole micromechanical structure can be formed, planarized, and integrated with standard silicon microelectronic circuits before the release etch. In addition, unlike surface-micromachined parts, the thickness of the molded parts is limited by the depth of the trench etch (typically 10--50 {mu}m) rather than the thickness of deposited polysilicon (typically 2 {mu}m). The capability of fabricating thicker (and therefore much stiffer and more massive) parts is critical for motion-sensing structures involving large gimballed platforms, proof masses, etc.

  1. Model Design of Piezoelectric Micromachined Modal Gyroscope

    Directory of Open Access Journals (Sweden)

    Xiaojun Hu

    2011-01-01

    Full Text Available This paper reports a novel kind of solid-state microgyroscope, which is called piezoelectric micromachined modal gyroscope (PMMG. PMMG has large stiffness and robust resistance to shake and strike because there is no evident mass-spring component in its structure. This work focused on quantitative optimization of the gyroscope, which is still blank for such gyroscope. The modal analysis by the finite element method (FEM was firstly conducted. A set of quantitative indicators were developed to optimize the operation mode. By FEM, the harmonic analysis was conducted to find the way to efficiently actuate the operational mode needed. The optimal configuration of driving electrodes was obtained. At last, the Coriolis analysis was conducted to show the relation between angular velocity and differential output voltage by the Coriolis force under working condition. The results obtained in this paper provide theoretical basis for realizing this novel kind of micromachined gyroscope.

  2. Implementing Cleaner Printed Wiring Board Technologies: Surface Finishes

    Science.gov (United States)

    This document describes the problems, solutions, and time and effort involved in implementing alternative surface finish technologies, and this guide is produced as part of the DfE Printed Wiring Board Project

  3. Applying Unmanned Ground Vehicle Technologies To Unmanned Surface Vehicles

    National Research Council Canada - National Science Library

    Ebken, John; Bruch, Mike; Lum, Jason

    2005-01-01

    Development of unmanned ground vehicles (UGVs) has been ongoing for decades. Much of the technology developed for UGVs can be applied directly to unmanned surface vehicles with little or no modification...

  4. Micromachined Parts Advance Medicine, Astrophysics, and More

    Science.gov (United States)

    2015-01-01

    In the mid-1990s, Marshall Space Flight Center awarded two SBIR contracts to Potomac Photonics, now based in Baltimore, for the development of computerized workstations capable of mass-producing tiny, intricate, diffractive optical elements. While the company has since discontinued the workstations, those contracts set the stage for Potomac Photonics to be a leader in the micromachining industry, where NASA remains one of its clients.

  5. In-pipe micromachine locomotion via the inertial stepping principle

    Energy Technology Data Exchange (ETDEWEB)

    Yum, Young Jin [University of Ulsan, Ulsan (Korea, Republic of); Hwang, Han Sub [Suweon Science College, Suweon (Korea, Republic of); Kelemen, Michal; Maxim, Vladislav; Frankovsky, Peter [Technical University of Kosice, Kosice (Slovakia)

    2014-08-15

    This paper discusses an in-pipe inspection micromachine intended for locomotion inside a small diameter pipe. The micromachine locomotion is based on the inertial stepping principle, which utilizes the drive force of the two-body impact. The in-pipe micromachine contacts the pipe through the elastic bristles installed on the in-pipe machine and in two lines and crossways with respect to the micromachine axle. The paper describes the principle of locomotion and the dynamics by which the unknown of both the parameters and the relations are experimentally identified. Based on the results, a simulation model was created, and the results of the simulations were compared with experimental results.

  6. Micromachined high-performance RF passives in CMOS substrate

    International Nuclear Information System (INIS)

    Li, Xinxin; Ni, Zao; Gu, Lei; Wu, Zhengzheng; Yang, Chen

    2016-01-01

    This review systematically addresses the micromachining technologies used for the fabrication of high-performance radio-frequency (RF) passives that can be integrated into low-cost complementary metal-oxide semiconductor (CMOS)-grade (i.e. low-resistivity) silicon wafers. With the development of various kinds of post-CMOS-compatible microelectromechanical systems (MEMS) processes, 3D structural inductors/transformers, variable capacitors, tunable resonators and band-pass/low-pass filters can be compatibly integrated into active integrated circuits to form monolithic RF system-on-chips. By using MEMS processes, including substrate modifying/suspending and LIGA-like metal electroplating, both the highly lossy substrate effect and the resistive loss can be largely eliminated and depressed, thereby meeting the high-performance requirements of telecommunication applications. (topical review)

  7. Capacitive micromachined ultrasonic transducers for medical imaging and therapy

    Science.gov (United States)

    Khuri-Yakub, Butrus T.; Oralkan, Ömer

    2011-05-01

    Capacitive micromachined ultrasonic transducers (CMUTs) have been subject to extensive research for the last two decades. Although they were initially developed for air-coupled applications, today their main application space is medical imaging and therapy. This paper first presents a brief description of CMUTs, their basic structure and operating principles. Our progression of developing several generations of fabrication processes is discussed with an emphasis on the advantages and disadvantages of each process. Monolithic and hybrid approaches for integrating CMUTs with supporting integrated circuits are surveyed. Several prototype transducer arrays with integrated front-end electronic circuits we developed and their use for 2D and 3D, anatomical and functional imaging, and ablative therapies are described. The presented results prove the CMUT as a micro-electro-mechanical systems technology for many medical diagnostic and therapeutic applications.

  8. Capacitive micromachined ultrasonic transducers for medical imaging and therapy

    International Nuclear Information System (INIS)

    Khuri-Yakub, Butrus T; Oralkan, Ömer

    2011-01-01

    Capacitive micromachined ultrasonic transducers (CMUTs) have been subject to extensive research for the last two decades. Although they were initially developed for air-coupled applications, today their main application space is medical imaging and therapy. This paper first presents a brief description of CMUTs, their basic structure and operating principles. Our progression of developing several generations of fabrication processes is discussed with an emphasis on the advantages and disadvantages of each process. Monolithic and hybrid approaches for integrating CMUTs with supporting integrated circuits are surveyed. Several prototype transducer arrays with integrated front-end electronic circuits we developed and their use for 2D and 3D, anatomical and functional imaging, and ablative therapies are described. The presented results prove the CMUT as a micro-electro-mechanical systems technology for many medical diagnostic and therapeutic applications

  9. Solid polymer electrolyte composite membrane comprising laser micromachined porous support

    Science.gov (United States)

    Liu, Han [Waltham, MA; LaConti, Anthony B [Lynnfield, MA; Mittelsteadt, Cortney K [Natick, MA; McCallum, Thomas J [Ashland, MA

    2011-01-11

    A solid polymer electrolyte composite membrane and method of manufacturing the same. According to one embodiment, the composite membrane comprises a rigid, non-electrically-conducting support, the support preferably being a sheet of polyimide having a thickness of about 7.5 to 15 microns. The support has a plurality of cylindrical pores extending perpendicularly between opposing top and bottom surfaces of the support. The pores, which preferably have a diameter of about 5 microns, are made by laser micromachining and preferably are arranged in a defined pattern, for example, with fewer pores located in areas of high membrane stress and more pores located in areas of low membrane stress. The pores are filled with a first solid polymer electrolyte, such as a perfluorosulfonic acid (PFSA) polymer. A second solid polymer electrolyte, which may be the same as or different than the first solid polymer electrolyte, may be deposited over the top and/or bottom of the first solid polymer electrolyte.

  10. Resonant gravimetric immuno sensing based on capacitive micromachined ultrasound transducers

    International Nuclear Information System (INIS)

    Virzonis, Darius; Gailius Vanagas; Dovydas Barauskas; Ramanaviciene, Almira; Makaraviciute, Asta; Ramanavicius, Arunas; Wen, Weijia; Kodzius, Rimantas

    2014-01-01

    High-frequency (40 MHz) and low-frequency (7 MHz) capacitive micromachined ultrasound transducers (CMUT) were fabricated and tested for use in gravimetric detection of biomolecules. The low-frequency CMUT sensors have a gold-coated surface, while the high-frequency sensors have a silicon nitride surface. Both surfaces were functionalized with bovine leukemia virus antigen gp51 acting as the antigen. On addition of an a specific antibody labeled with horseradish peroxidase (HRP), the antigen/antibody complex is formed on the surface and quantified by HRP-catalyzed oxidation of tetramethylbenzidine. It has been found that a considerably smaller quantity of immuno complex is formed on the high frequency sensor surface. In parallel, the loading of the surface of the CMUT was determined via resonance frequency and electromechanical resistance readings. Following the formation of the immuno complexes, the resonance frequencies of the low-frequency and high-frequency sensors decrease by up to 420 and 440 kHz, respectively. Finite element analysis reveals that the loading of the (gold-coated) low frequency sensors is several times larger than that on high frequency sensors. The formation of the protein film with pronounced elasticity and stress on the gold surface case is discussed. We also discuss the adoption of this method for the detection of DNA using a hybridization assay following polymerase chain reaction. (author)

  11. Resonant gravimetric immunosensing based on capacitive micromachined ultrasound transducers

    KAUST Repository

    Viržonis, Darius

    2014-04-08

    High-frequency (40 MHz) and low-frequency (7 MHz) capacitive micromachined ultrasound transducers (CMUT) were fabricated and tested for use in gravimetric detection of biomolecules. The low-frequency CMUT sensors have a gold-coated surface, while the high-frequency sensors have a silicon nitride surface. Both surfaces were functionalized with bovine leukemia virus antigen gp51 acting as the antigen. On addition of an a specific antibody labeled with horseradish peroxidase (HRP), the antigen/antibody complex is formed on the surface and quantified by HRP-catalyzed oxidation of tetramethylbenzidine. It has been found that a considerably smaller quantity of immuno complex is formed on the high frequency sensor surface. In parallel, the loading of the surface of the CMUT was determined via resonance frequency and electromechanical resistance readings. Following the formation of the immuno complexes, the resonance frequencies of the low-frequency and high-frequency sensors decrease by up to 420 and 440 kHz, respectively. Finite element analysis reveals that the loading of the (gold-coated) low frequency sensors is several times larger than that on high frequency sensors. The formation of the protein film with pronounced elasticity and stress on the gold surface case is discussed. We also discuss the adoption of this method for the detection of DNA using a hybridization assay following polymerase chain reaction.

  12. Technology of Strengthening Steel Details by Surfacing Composite Coatings

    Science.gov (United States)

    Burov, V. G.; Bataev, A. A.; Rakhimyanov, Kh M.; Mul, D. O.

    2016-04-01

    The article considers the problem of forming wear resistant meal ceramic coatings on steel surfaces using the results of our own investigations and the analysis of achievements made in the country and abroad. Increasing the wear resistance of surface layers of steel details is achieved by surfacing composite coatings with carbides or borides of metals as disperse particles in the strengthening phase. The use of surfacing on wearing machine details and mechanisms has a history of more than 100 years. But still engineering investigations in this field are being conducted up to now. The use of heating sources which provide a high density of power allows ensuring temperature and time conditions of surfacing under which composites with peculiar service and functional properties are formed. High concentration of energy in the zone of melt, which is created from powder mixtures and the hardened surface layer, allows producing the transition zone between the main material and surfaced coating. Surfacing by the electron beam directed from vacuum to the atmosphere is of considerable technological advantages. They give the possibility of strengthening surface layers of large-sized details by surfacing powder mixtures without their preliminary compacting. A modified layer of the main metal with ceramic particles distributed in it is created as a result of heating surfaced powders and the detail surface layer by the electron beam. Technology of surfacing allows using powders of refractory metals and graphite in the composition of powder mixtures. They interact with one another and form the particles of the hardening phase of the composition coating. The chemical composition of the main and surfaced materials is considered to be the main factor which determines the character of metallurgical processes in local zones of melt as well as the structure and properties of surfaced composition.

  13. Surface X-ray studies of catalytic clean technologies.

    Science.gov (United States)

    Lee, Adam F; Prabhakaran, Vinod; Wilson, Karen

    2010-06-14

    The rational design of new heterogeneous catalysts for clean chemical technologies can be accelerated by molecular level insight into surface chemical processes. In situ methodologies, able to provide time-resolved and/or pressure dependent information on the evolution of reacting adsorbed layers over catalytically relevant surfaces, are therefore of especial interest. Here we discuss recent applications of surface X-ray techniques to surface-catalysed oxidations, (de)hydrogenations, C-C coupling, dehalogenation and associated catalyst restructuring, and explore how these may help to shape future sustainable chemistry.

  14. Fly's proprioception-inspired micromachined strain-sensing structure: idea, design, modeling and simulation, and comparison with experimental results

    Energy Technology Data Exchange (ETDEWEB)

    Wicaksono, D H B [Department of Microelectronics, Delft University of Technology, Mekelweg 4, Delft, Zuid-Holland 2628CD (Netherlands); Zhang, L-J [Department of Microelectronics, Delft University of Technology, Mekelweg 4, Delft, Zuid-Holland 2628CD (Netherlands); Pandraud, G [Department of Microelectronics, Delft University of Technology, Mekelweg 4, Delft, Zuid-Holland 2628CD (Netherlands); French, P J [Department of Microelectronics, Delft University of Technology, Mekelweg 4, Delft, Zuid-Holland 2628CD (Netherlands); Vincent, J F V [Department of Mech. Engineering, Bath University Bath, BA2 7AY (United Kingdom)

    2006-04-01

    A new strain-sensing structure inspired from insect's (especially the Fly) propricoception sensor is devised. The campaniform sensillum is a strain-sensing microstructure with very high sensitivity despite its small dimension (diameter {approx}10 {mu}m in a relatively stiff material of insect's exocuticle (E = {approx}10{sup 9} Pa). Previous work shows that the high sensitivity of this structure towards strain is due to its membrane-in-recess- and strainconcentrating-hole-features. Based on this inspiration, we built similar structure using silicon micromachining technology. Then a simple characterisation setup was devised. Here, we present briefly, finite-element modeling and simulation based on this actual sample preparation for the characterisation. As comparison and also to understand mechanical features responsible for the strain-sensitivity, we performed the modeling on different mechanical structures: bulk chunk, blind-hole, through-hole, surface membrane, and membrane-in-recess. The actual experimental characterisation was performed previously using optical technique to membrane in-recess micromachined Si structure. The FEM simulation results confirm that the bending stress and strain are concentrated in the hole-vicinity. The membrane inside the hole acts as displacement transducer. The FEM is in conformity with previous analytical results, as well as the optical characterisation result. The end goal is to build a new type MEMS strain sensor.

  15. Laser direct micro-machining with top-hat-converted single mode lasers

    Science.gov (United States)

    Homburg, O.; Toennissen, F.; Mitra, T.; Lissotschenko, V.

    2008-02-01

    Laser direct micro-machining processes are used in a variety of industries like inkjet printing, semiconductor processing, solar technology, flat-panel display production and medicine. Various kinds of materials, e.g. ceramics, metals, isolators, oxides, organics and semiconductors are being structured. In most cases pulsed single mode solid state lasers with an inhomogeneous Gaussian beam profile are employed, like YAG lasers and their harmonics. However, the quality and functionality of the generated structures and micro-systems as well as the speed of the process can be improved by the utilization of homogeneous top hat profiles. The beam shaping principle of refractive Gaussian-to-top-hat converters is shown. Compact beam shaper modules based on this principle have been developed - supporting most direct laser micro-machining applications. The resulting process advantages are demonstrated by selected application results, namely the drilling of holes and patterning of trenches for different kinds of materials.

  16. Reactor surface contamination stabilization. Innovative technology summary report

    International Nuclear Information System (INIS)

    1998-11-01

    Contaminated surfaces, such as the face of a nuclear reactor, need to be stabilized (fixed) to avoid airborne contamination during decontamination and decommissioning activities, and to prepare for interim safe storage. The traditional (baseline) method of fixing the contamination has been to spray a coating on the surfaces, but ensuring complete coverage over complex shapes, such as nozzles and hoses, is difficult. The Hanford Site C Reactor Technology Demonstration Group demonstrated innovative technologies to assess stabilization properties of various coatings and to achieve complete coverage of complex surfaces on the reactor face. This demonstration was conducted in two phases: the first phase consisted of a series of laboratory assessments of various stabilization coatings on metal coupons. For the second phase, coatings that passed the laboratory tests were applied to the front face of the C Reactor and evaluated. The baseline coating (Rust-Oleum No. 769) and one of the innovative technologies did not completely cover nozzle assemblies on the reactor face, the most critical of the second-phase evaluation criteria. However, one of the innovative coating systems, consisting of a base layer of foam covered by an outer layer of a polymeric film, was successful. The baseline technology would cost approximately 33% as much as the innovative technology cost of $64,000 to stabilize an entire reactor face (196 m 2 or 2116 ft 2 ) with 2,004 nozzle assemblies, but the baseline system failed to provide complete surface coverage

  17. A Three-Dimensional Enormous Surface Area Aluminum Microneedle Array with Nanoporous Structure

    OpenAIRE

    Chen, Po Chun; Hsieh, Sheng Jen; Chen, Chien Chon; Zou, Jun

    2013-01-01

    We proposed fabricating an aluminum microneedle array with a nanochannel structure on the surface by combining micromachining, electrolyte polishing, and anodization methods. The microneedle array provides a three-dimensional (3D) structure that possesses several hundred times more surface area than a traditional nanochannel template. Therefore, the microneedle array can potentially be used in many technology applications. This 3D microneedle array device can not only be used for painless inj...

  18. A Lunar Surface System Supportability Technology Development Roadmap

    Science.gov (United States)

    Oeftering, Richard C.; Struk, Peter M.; Taleghani, barmac K.

    2011-01-01

    This paper discusses the establishment of a Supportability Technology Development Roadmap as a guide for developing capabilities intended to allow NASA s Constellation program to enable a supportable, sustainable and affordable exploration of the Moon and Mars. Presented is a discussion of supportability, in terms of space facility maintenance, repair and related logistics and a comparison of how lunar outpost supportability differs from the International Space Station. Supportability lessons learned from NASA and Department of Defense experience and their impact on a future lunar outpost is discussed. A supportability concept for future missions to the Moon and Mars that involves a transition from a highly logistics dependent to a logistically independent operation is discussed. Lunar outpost supportability capability needs are summarized and a supportability technology development strategy is established. The resulting Lunar Surface Systems Supportability Strategy defines general criteria that will be used to select technologies that will enable future flight crews to act effectively to respond to problems and exploit opportunities in an environment of extreme resource scarcity and isolation. This strategy also introduces the concept of exploiting flight hardware as a supportability resource. The technology roadmap involves development of three mutually supporting technology categories, Diagnostics Test and Verification, Maintenance and Repair, and Scavenging and Recycling. The technology roadmap establishes two distinct technology types, "Embedded" and "Process" technologies, with different implementation and thus different criteria and development approaches. The supportability technology roadmap addresses the technology readiness level, and estimated development schedule for technology groups that includes down-selection decision gates that correlate with the lunar program milestones. The resulting supportability technology roadmap is intended to develop a set

  19. Flexure-beam micromirror devices and potential expansion for smart micromachining

    Science.gov (United States)

    Lin, Tseng-Hwang

    1996-05-01

    Texas Instruments has been developing both digital and analog micromirror devices since the late 1970s. The analog flexure-beam micromirror devices are primarily targeted for imaging identification. Digital multiplexing mechanisms are used in column and row selection to address discretized analog signals into the array. Amplifiers and sample-and-hold circuits provide the appropriate signal range to control the micromirrors. Analog-to-digital and digital- to-analog conversions are currently built into the interface electronics, and will potentially be built into the chip. The micromirror devices are built on the top of the addressing circuits using sacrificial layers and two different metal layers. This concept of surface micromachining and mixed-signal circuit integration enables us to investigate the possibility of smart micromachining. Micromirror device applications can expand beyond optical applications into microsensor and other microactuator areas. The addressing circuits can be used in the interface of analog real-world and smart control circuits.

  20. Fabrication of three-dimensional microdisk resonators in calcium fluoride by femtosecond laser micromachining

    Science.gov (United States)

    Lin, Jintian; Xu, Yingxin; Tang, Jialei; Wang, Nengwen; Song, Jiangxin; He, Fei; Fang, Wei; Cheng, Ya

    2014-09-01

    We report on fabrication of on-chip calcium fluoride (CaF2) microdisk resonators using water-assisted femtosecond laser micromachining. Focused ion beam (FIB) milling is used to create ultra-smooth sidewalls. The quality ( Q) factors of the fabricated microresonators are measured to be 4.2 × 104 at wavelengths near 1,550 nm. The Q factor is mainly limited by the scattering from the bottom surface of the disk whose roughness remains high due to the femtosecond laser micromachining process. This technique facilitates the formation of on-chip microresonators on various kinds of bulk crystalline materials, which can benefit a wide range of applications such as nonlinear optics, quantum optics, and chip-level integration of photonic devices.

  1. Technologies for surface-treatment and under water cutting

    International Nuclear Information System (INIS)

    Bach, F.W.; Redeker, C.F.; Versemann, R.; Brueggemann, P.

    2003-01-01

    Technologies for processing surfaces and decomposition of installations under water will be presented and compared in their use for dismantling of nuclear facilities. For the removal of surfaces the dry ice- and the dry ice laser blasting process are examined. Experiences in the use of a 1kW Nd:YAG laser for under water cutting of metals are presented. An assisting tool to choose a suitable process for removing coatings and component's surfaces will be developed. The presented work is part of the progress made in a research project consisting of 11 partners: developers, operators and end-users. (orig.)

  2. Surface chemistry: Key to control and advance myriad technologies

    Science.gov (United States)

    Yates, John T.; Campbell, Charles T.

    2011-01-01

    This special issue on surface chemistry is introduced with a brief history of the field, a summary of the importance of surface chemistry in technological applications, a brief overview of some of the most important recent developments in this field, and a look forward to some of its most exciting future directions. This collection of invited articles is intended to provide a snapshot of current developments in the field, exemplify the state of the art in fundamental research in surface chemistry, and highlight some possibilities in the future. Here, we show how those articles fit together in the bigger picture of this field. PMID:21245359

  3. Coal surface control for advanced physical fine coal cleaning technologies

    Energy Technology Data Exchange (ETDEWEB)

    Morsi, B.I.; Chiang, S.H.; Sharkey, A.; Blachere, J.; Klinzing, G.; Araujo, G.; Cheng, Y.S.; Gray, R.; Streeter, R.; Bi, H.; Campbell, P.; Chiarlli, P.; Ciocco, M.; Hittle, L.; Kim, S.; Kim, Y.; Perez, L.; Venkatadri, R.

    1992-01-01

    This final report presents the research work carried out on the Coal Surface Control for Advanced Physical Fine Coal Cleaning Technologies project, sponsored by the US Department of Energy, Pittsburgh Energy Technology Center (DOE/PETC). The project was to support the engineering development of the selective agglomeration technology in order to reduce the sulfur content of US coals for controlling SO[sub 2] emissions (i.e., acid rain precursors). The overall effort was a part of the DOE/PETCs Acid Rain Control Initiative (ARCI). The overall objective of the project is to develop techniques for coal surface control prior to the advanced physical fine coal cleaning process of selective agglomeration in order to achieve 85% pyrite sulfur rejection at an energy recovery greater than 85% based on run-of-mine coal. The surface control is meant to encompass surface modification during grinding and laboratory beneficiation testing. The project includes the following tasks: Project planning; methods for analysis of samples; development of standard beneficiation test; grinding studies; modification of particle surface; and exploratory R D and support. The coal samples used in this project include three base coals, Upper Freeport - Indiana County, PA, Pittsburgh NO. 8 - Belmont County, OH, and Illinois No. 6 - Randolph County, IL, and three additional coals, Upper Freeport - Grant County- WV, Kentucky No. 9 Hopkins County, KY, and Wyodak - Campbell County, WY. A total of 149 drums of coal were received.

  4. NOVEL EXCAVATION TECHNOLOGIES FOR EFFICIENT AND ECONOMIC SURFACE MINING

    Energy Technology Data Exchange (ETDEWEB)

    Vladislav Kecojevic; Samuel Frimpong

    2005-05-01

    Ground excavation constitutes a significant component of production costs in any surface mining operation. The excavation process entails material digging and removal in which the equipment motion is constrained by the workspace geometry. A major excavation problem is the variability of material properties, resulting in varying mechanical energy input and stress loading of shovel dipper-and-tooth assembly across the working bench. This variability has a huge impact on the shovel dipper and tooth assembly in hard formations. With this in mind, the primary objectives of the project were to (i) provide the theoretical basis to develop the Intelligent Shovel Excavation (ISE) technology to solve the problems associated with excavation in material formations; (ii) advance knowledge and frontiers in shovel excavation through intelligent navigation; and (iii) submit proposal for the design, development and implementation of the ISE technology for shovel excavation at experimental surface mining sites. The mathematical methods were used to (i) develop shovel's kinematics and dynamics, and (ii) establish the relationship between shovel parameters and the resistive forces from the material formation during excavation process. The ADAMS simulation environment was used to develop the hydraulic and cable shovel virtual prototypes. Two numerical examples are included to test the theoretical hypotheses and the obtained results are discussed. The area of sensor technology was studied. Application of specific wrist-mounted sensors to characterize the material, bucket and frame assembly was determined. Data acquisition, display and control system for shovel loading technology was adopted. The concept of data acquisition and control system was designed and a shovel boom stresses were simulated. A multi-partner collaboration between research organizations, shovel manufacturer, hardware and sensor technology companies, and surface mining companies is proposed to test design

  5. TOPICAL REVIEW: Capacitive micromachined ultrasonic transducer arrays for minimally invasive medical ultrasound

    Science.gov (United States)

    Chen, Jingkuang

    2010-02-01

    This paper reviews the minimally invasive capacitive micromachined ultrasonic transducer (CMUT) arrays for medical diagnosis and therapy. While piezoelectric transducers dominate today's medical ultrasound market, the capacitive micromachined ultrasonic transducer has recently emerged as a promising alternative which delivers a comparable device performance to its piezoelectric counterparts, is compatible with front-end circuit integration, allows high-density imager integration and is relative easy in miniaturization. Utilizing MEMS technology, the substrate of CMUT arrays can be micromachined into miniature platforms with various geometrical shapes, which include needles, three-dimensional prisms, as well as other flexible-substrate configurations. These arrays are useful for reaching deep inside the tissue or an organ with a minimally invasive approach. Due to the close proximity of the transducers to the target organ/tissue, a higher resolution/accuracy of diagnostic information can be achieved. In addition to pulse-echo and photoacoustic imaging, high-power CMUT devices capable of delivering ultrasounds with a pressure greater than 1.0 MPa have been monolithically integrated with imager CMUTs for image-guided therapy (IGT). Such miniature devices would facilitate diagnostic and therapy interventions not possible with conventional piezoelectric transducers.

  6. Development of exosome surface display technology in living human cells

    Energy Technology Data Exchange (ETDEWEB)

    Stickney, Zachary, E-mail: zstickney@scu.edu; Losacco, Joseph, E-mail: jlosacco@scu.edu; McDevitt, Sophie, E-mail: smmcdevitt@scu.edu; Zhang, Zhiwen, E-mail: zzhang@scu.edu; Lu, Biao, E-mail: blu2@scu.edu

    2016-03-25

    Surface display technology is an emerging key player in presenting functional proteins for targeted drug delivery and therapy. Although a number of technologies exist, a desirable mammalian surface display system is lacking. Exosomes are extracellular vesicles that facilitate cell–cell communication and can be engineered as nano-shuttles for cell-specific delivery. In this study, we report the development of a novel exosome surface display technology by exploiting mammalian cell secreted nano-vesicles and their trans-membrane protein tetraspanins. By constructing a set of fluorescent reporters for both the inner and outer surface display on exosomes at two selected sites of tetraspanins, we demonstrated the successful exosomal display via gene transfection and monitoring fluorescence in vivo. We subsequently validated our system by demonstrating the expected intracellular partitioning of reporter protein into sub-cellular compartments and secretion of exosomes from human HEK293 cells. Lastly, we established the stable engineered cells to harness the ability of this robust system for continuous production, secretion, and uptake of displayed exosomes with minimal impact on human cell biology. In sum, our work paved the way for potential applications of exosome, including exosome tracking and imaging, targeted drug delivery, as well as exosome-mediated vaccine and therapy.

  7. Fiber laser micromachining of magnesium alloy tubes for biocompatible and biodegradable cardiovascular stents

    Science.gov (United States)

    Demir, Ali Gökhan; Previtali, Barbara; Colombo, Daniele; Ge, Qiang; Vedani, Maurizio; Petrini, Lorenza; Wu, Wei; Biffi, Carlo Alberto

    2012-02-01

    Magnesium alloys constitute an attractive solution for cardiovascular stent applications due to their intrinsic properties of biocompatibility and relatively low corrosion resistance in human-body fluids, which results in as a less intrusive treatment. Laser micromachining is the conventional process used to cut the stent mesh, which plays the key role for the accurate reproduction of the mesh design and the surface quality of the produced stent that are important factors in ensuring the mechanical and corrosion resistance properties of such a kind of devices. Traditionally continuous or pulsed laser systems working in microsecond pulse regime are employed for stent manufacturing. Pulsed fiber lasers on the other hand, are a relatively new solution which could balance productivity and quality aspects with shorter ns pulse durations and pulse energies in the order of mJ. This work reports the study of laser micromachining and of AZ31 magnesium alloy for the manufacturing of cardiovascular stents with a novel mesh design. A pulsed active fiber laser system operating in nanosecond pulse regime was employed for the micromachining. Laser parameters were studied for tubular cutting on a common stent material, AISI 316L tubes with 2 mm in diameter and 0.2 mm in thickness and on AZ31 tubes with 2.5 mm in diameter and 0.2 in thickness. In both cases process parameters conditions were examined for reactive and inert gas cutting solutions and the final stent quality is compared.

  8. Fabrication and simulation of glass micromachining using CO2 laser processing with PDMS protection

    Science.gov (United States)

    Chung, C. K.; Lin, S. L.; Wang, H. Y.; Tan, T. K.; Tu, K. Z.; Lung, H. F.

    2013-11-01

    Traditional glass micromachining using laser processing in air would produce many kinds of defects, such as bulges, debris, micro-cracks and scorches. In this article, a poly-dimethylsiloxane (PDMS) protection processing has been presented to reduce the temperature gradient and heat-affected zone (HAZ) to achieve crack-free Pyrex glass machining. A good quality of etched surface which is a clear and much-reduced bulge without crack and scorch is achieved using CO2 laser micromachining at 150 μm thick PDMS protection layer and the laser powers of 10-15 W and scanning speeds of 228-342 mm/s for five passes. The PDMS cover layer benefits feature size and bulge height reduction. The alpha-step measured profile shows that the much reduced bulge height around the rims of channel was about 1.2 μm at 150 μm thick PDMS about 13 times smaller than that in air. The ANSYS software was used to analyze the temperature distribution and thermal stress field of glass micromachining in air without and with PDMS cover layer. The smaller temperature gradient observed in PDMS protection processing has the smaller HAZ and diminishes the crack formation during the laser processing.

  9. Fluid Mechanics of Biological Surfaces and their Technological Application

    Science.gov (United States)

    Bechert, D. W.; Bruse, M.; Hage, W.; Meyer, R.

    A survey is given on fluid-dynamic effects caused by the structure and properties of biological surfaces. It is demonstrated that the results of investigations aiming at technological applications can also provide insights into biophysical phenomena. Techniques are described both for reducing wall shear stresses and for controlling boundary-layer separation. (a) Wall shear stress reduction was investigated experimentally for various riblet surfaces including a shark skin replica. The latter consists of 800 plastic model scales with compliant anchoring. Hairy surfaces are also considered, and surfaces in which the no-slip condition is modified. Self-cleaning surfaces such as that of lotus leaves represent an interesting option to avoid fluid-dynamic deterioration by the agglomeration of dirt. An example of technological implementation is discussed for riblets in long-range commercial aircraft. (b) Separation control is also an important issue in biology. After a few brief comments on vortex generators, the mechanism of separation control by bird feathers is described in detail. Self-activated movable flaps (=artificial bird feathers) represent a high-lift system enhancing the maximum lift of airfoils by about 20%. This is achieved without perceivable deleterious effects under cruise conditions. Finally, flight experiments on an aircraft with laminar wing and movable flaps are presented.

  10. MEASUREMENT OF NANOSTRUCTURES WITH MICROMACHINED MICROSCOPES

    Energy Technology Data Exchange (ETDEWEB)

    G.S. KINO; W.E. MOERNER

    2005-04-30

    We have made reproducible scanning probes with high efficiency, and predictable and reproducible character-istics. We obtained good efficiency with dimensions well below the diffraction limit, so that rela-tively small laser powers in the milliwatt range can be used. For single frequency operation, only low power is necessary to obtain very high fields for the excitation of well-defined Raman scattering, and to work in a reflection mode with good scanning speeds; obtained predictable results with very high fields suitable for obtaining Raman scattering and two-photon scattering; made a scanning probe mounted on a micromachined cantilever to obtain high definition reflection mode images that can be scanned rapidly;and observed Raman scattering using bowtie antennas with CW excitation.

  11. Micromachined two dimensional resistor arrays for determination of gas parameters

    NARCIS (Netherlands)

    van Baar, J.J.J.; Verwey, Willem B.; Dijkstra, Mindert; Dijkstra, Marcel; Wiegerink, Remco J.; Lammerink, Theodorus S.J.; Krijnen, Gijsbertus J.M.; Elwenspoek, Michael Curt

    A resistive sensor array is presented for two dimensional temperature distribution measurements in a micromachined flow channel. This allows simultaneous measurement of flow velocity and fluid parameters, like thermal conductivity, diffusion coefficient and viscosity. More general advantages of

  12. Integration of Capacitive Micromachined Ultrasound Transducers to Microfluidic Devices

    KAUST Repository

    Viržonis, Darius

    2013-10-22

    The design and manufacturing flexibility of capacitive micromachined ultrasound transducers (CMUT) makes them attractive option for integration with microfluidic devices both for sensing and fluid manipulation. CMUT concept is introduced here by presentin

  13. Comparison of the effectiveness of different antimicrobial surface technologies

    Directory of Open Access Journals (Sweden)

    Buhl Sebastian

    2017-09-01

    Full Text Available The risk of infection via microbiologically contaminated surfaces has already been demonstrated by other publications. In this work two different antibacterial surface technologies transition metalloacids (AMiSTec and TiO2/AgNO3 (Health Complete were compared regarding feasibility as well as their advantages and disadvantages. The examination of the antimicrobial activity was assessed according to the JIS Z 2801. We could demonstrate that all of our tested samples showed a strong antimicrobial activity (>log 3 germ reduction in the JIS experiments. Furthermore this strong antibacterial effect could be shown already after <30min incubation and at low light intensity (approx. 300 Lux for the TiO2/AgNO3 samples. Both technologies provide a high potential for an improved infection control for example in a high risk environment like operation rooms or intensive care units.

  14. Development of a Novel Transparent Flexible Capacitive Micromachined Ultrasonic Transducer.

    Science.gov (United States)

    Pang, Da-Chen; Chang, Cheng-Min

    2017-06-20

    This paper presents the world's first transparent flexible capacitive micromachined ultrasonic transducer (CMUT) that was fabricated through a roll-lamination technique. This polymer-based CMUT has advantages of transparency, flexibility, and non-contacting detection which provide unique functions in display panel applications. Comprising an indium tin oxide-polyethylene terephthalate (ITO-PET) substrate, SU-8 sidewall and vibrating membranes, and silver nanowire transparent electrode, the transducer has visible-light transmittance exceeding 80% and can operate on curved surfaces with a 40 mm radius of curvature. Unlike the traditional silicon-based high temperature process, the CMUT can be fabricated on a flexible substrate at a temperature below 100 °C to reduce residual stress introduced at high temperature. The CMUT on the curved surfaces can detect a flat target and finger at distances up to 50 mm and 40 mm, respectively. The transparent flexible CMUT provides a better human-machine interface than existing touch panels because it can be integrated with a display panel for non-contacting control in a health conscious environment and the flexible feature is critical for curved display and wearable electronics.

  15. Development of a Novel Transparent Flexible Capacitive Micromachined Ultrasonic Transducer

    Directory of Open Access Journals (Sweden)

    Da-Chen Pang

    2017-06-01

    Full Text Available This paper presents the world’s first transparent flexible capacitive micromachined ultrasonic transducer (CMUT that was fabricated through a roll-lamination technique. This polymer-based CMUT has advantages of transparency, flexibility, and non-contacting detection which provide unique functions in display panel applications. Comprising an indium tin oxide-polyethylene terephthalate (ITO-PET substrate, SU-8 sidewall and vibrating membranes, and silver nanowire transparent electrode, the transducer has visible-light transmittance exceeding 80% and can operate on curved surfaces with a 40 mm radius of curvature. Unlike the traditional silicon-based high temperature process, the CMUT can be fabricated on a flexible substrate at a temperature below 100 °C to reduce residual stress introduced at high temperature. The CMUT on the curved surfaces can detect a flat target and finger at distances up to 50 mm and 40 mm, respectively. The transparent flexible CMUT provides a better human-machine interface than existing touch panels because it can be integrated with a display panel for non-contacting control in a health conscious environment and the flexible feature is critical for curved display and wearable electronics.

  16. Evaluation of metrology technologies for free form surfaces

    DEFF Research Database (Denmark)

    Arámbula, K.; Siller, H.R.; De Chiffre, Leonardo

    2012-01-01

    This research work describes a novel approach for comparing different technologies for free form surface metrology: computerized tomography (CT), photogrammetry and coordinate measuring machines (CMM). The comparison has the aim of providing relevant information for the selection of metrology...... equipment when measuring free form components. Results demonstrate that there is the imperative need to assess the uncertainty and reproducibility of CT and photogrammetry measurements by applying some calibration procedures taking into account some recommendations for work piece alignment. This article...

  17. International Symposium on Interfacial Joining and Surface Technology (IJST2013)

    Science.gov (United States)

    Takahashi, Yasuo

    2014-08-01

    Interfacial joining (bonding) is a widely accepted welding process and one of the environmentally benign technologies used in industrial production. As the bonding temperature is lower than the melting point of the parent materials, melting of the latter is kept to a minimum. The process can be based on diffusion bonding, pressure welding, friction welding, ultrasonic bonding, or brazing-soldering, all of which offer many advantages over fusion welding. In addition, surface technologies such as surface modification, spraying, coating, plating, and thin-film formation are necessary for advanced manufacturing, fabrication, and electronics packaging. Together, interfacial joining and surface technology (IJST) will continue to be used in various industrial fields because IJST is a very significant form of environmentally conscious materials processing. The international symposium of IJST 2013 was held at Icho Kaikan, Osaka University, Japan from 27-29 November, 2013. A total of 138 participants came from around the world to attend 56 oral presentations and 36 posters presented at the symposium, and to discuss the latest research and developments on interfacial joining and surface technologies. This symposium was also held to commemorate the 30th anniversary of the Technical Commission on Interfacial Joining of the Japan Welding Society. On behalf of the chair of the symposium, it is my great pleasure to present this volume of IOP Conference Series: Materials Science and Engineering (MSE). Among the presentations, 43 papers are published here, and I believe all of the papers have provided the welding community with much useful information. I would like to thank the authors for their enthusiastic and excellent contributions. Finally, I would like to thank all members of the committees, secretariats, participants, and everyone who contributed to this symposium through their support and invaluable effort for the success of IJST 2013. Yasuo Takahashi Chair of IJST 2013

  18. International Symposium on Interfacial Joining and Surface Technology (IJST2013)

    International Nuclear Information System (INIS)

    Takahashi, Yasuo

    2014-01-01

    Interfacial joining (bonding) is a widely accepted welding process and one of the environmentally benign technologies used in industrial production. As the bonding temperature is lower than the melting point of the parent materials, melting of the latter is kept to a minimum. The process can be based on diffusion bonding, pressure welding, friction welding, ultrasonic bonding, or brazing-soldering, all of which offer many advantages over fusion welding. In addition, surface technologies such as surface modification, spraying, coating, plating, and thin-film formation are necessary for advanced manufacturing, fabrication, and electronics packaging. Together, interfacial joining and surface technology (IJST) will continue to be used in various industrial fields because IJST is a very significant form of environmentally conscious materials processing. The international symposium of IJST 2013 was held at Icho Kaikan, Osaka University, Japan from 27–29 November, 2013. A total of 138 participants came from around the world to attend 56 oral presentations and 36 posters presented at the symposium, and to discuss the latest research and developments on interfacial joining and surface technologies. This symposium was also held to commemorate the 30th anniversary of the Technical Commission on Interfacial Joining of the Japan Welding Society. On behalf of the chair of the symposium, it is my great pleasure to present this volume of IOP Conference Series: Materials Science and Engineering (MSE). Among the presentations, 43 papers are published here, and I believe all of the papers have provided the welding community with much useful information. I would like to thank the authors for their enthusiastic and excellent contributions. Finally, I would like to thank all members of the committees, secretariats, participants, and everyone who contributed to this symposium through their support and invaluable effort for the success of IJST 2013. Yasuo Takahashi Chair of IJST 2013

  19. Smooth Surfaces: A review of current and planned smooth surface technologies for fouling resistance in boiler

    Energy Technology Data Exchange (ETDEWEB)

    Corkery, Robert; Baefver, Linda; Davidsson, Kent; Feiler, Adam

    2012-02-15

    Here we have described the basics of boilers, fuels, combustion, flue gas composition and mechanisms of deposition. We have reviewed coating technologies for boiler tubes, including their materials compositions, nano structures and performances. The surface forces in boilers, in particular those relevant to formation of unwanted deposits in boilers have also been reviewed, and some comparative calculations have been included to indicate the procedures needed for further study. Finally practical recommendations on the important considerations in minimizing deposition on boiler surfaces are made

  20. Non-traditional micromachining processes fundamentals and applications

    CERN Document Server

    Bhattacharyya, B; Davim, J

    2017-01-01

    This book presents a complete coverage of micromachining processes from their basic material removal phenomena to past and recent research carried by a number of researchers worldwide. Chapters on effective utilization of material resources, improved efficiency, reliability, durability, and cost effectiveness of the products are presented. This book provides the reader with new and recent developments in the field of micromachining and microfabrication of engineering materials.

  1. In-fiber whispering-gallery-mode resonator fabricated by femtosecond laser micromachining.

    Science.gov (United States)

    Shi, Leilei; Zhu, Tao; Huang, Dongmei; Liu, Min; Deng, Ming; Huang, Wei

    2015-08-15

    An in-fiber whispering-gallery-mode resonator fabricated by femtosecond laser micromachining is demonstrated. The cylinder resonator cavity is fabricated by scanning the D-fiber cladding with infrared femtosecond pulses along a cylindrical trace with a radius of 25 μm and height of 20 μm. Quality factor on the order of 10(3) is achieved by smoothing the cavity surface with an ultrasonic cleaner, which is mainly limited by the surface roughness of several hundred nanometers. Resonant characteristics and polarization dependence of the proposed resonator are also studied in detail. Our method takes a step forward in the integration of whispering-gallery-mode resonators.

  2. Advanced Surface Polishing For Accelerator Technology Using Ion Beams

    Science.gov (United States)

    Insepov, Z.; Norem, J.; Hassanein, A.; Wu, A. T.

    2009-03-01

    A gas cluster ion beam (GCIB) technology was successfully applied to surface treatment of Cu, stainless steel, Ti, and Nb samples and to Nb rf-cavities by using accelerated cluster ion beams of Ar, O2 and combinations of them, with accelerating voltages up to 35 kV. DC field emission (dark current) measurements and electron microscopy were used to investigate metal surfaces treated by GCIB. The experimental results showed that GCIB technique can significantly reduce the number of field emitters and can change the structure of the Nb oxide layer on the surface. The RF tests of the GCIB-treated Nb rf-cavities showed improvement of the quality factor Q at 4.5 K. The superconducting gap was also enhanced by using the oxygen GCIB irradiation exposure.

  3. An AES Study of the Room Temperature Surface Conditioning of Technological Metal Surfaces by Electron Irradiation

    OpenAIRE

    Scheuerlein, C; Hilleret, Noël; Taborelli, M; Brown, A; Baker, M A

    2002-01-01

    The modifications to technological copper and niobium surfaces induced by 2.5 keV electron irradiation have been investigated in the context of the conditioning process occurring in particle accelerator ultra high vacuum systems. Changes in the elemental surface composition have been found using Scanning Auger Microscopy (SAM) by monitoring the carbon, oxygen and metal Auger peak intensities as a function of electron irradiation in the dose range 10-6 to 10-2 C mm-2. The surface analysis resu...

  4. Capacitive micromachined ultrasonic transducers (CMUTs) for photoacoustic imaging

    Science.gov (United States)

    Vaithilingam, Srikant; Wygant, Ira O.; Kuo, Paulina S.; Zhuang, Xuefeng; Oralkan, Ömer; Olcott, Peter D.; Khuri-Yakub, Butrus T.

    2006-02-01

    In photoacoustic (optoacoustic) medical imaging, short laser pulses irradiate absorbing structures found in tissue, such as blood vessels, causing brief thermal expansions that in turn generate ultrasound waves. These ultrasound waves which correspond to the optical absorption distribution were imaged using a two dimensional array of capacitive micromachined ultrasonic transducers (CMUTs). Advantages of CMUT technology for photoacoustic imaging include the ease of integration with electronics, ability to fabricate large two dimensional arrays, arrays with arbitrary geometries, wide-bandwidth arrays and high-frequency arrays. In this study, a phantom consisting of three 0.86-mm inner diameter polyethylene tubes inside a tissue mimicking material was imaged using a 16 x 16 element CMUT array. The center tube was filled with India-ink to provide optical contrast. Traditional pulse-echo data as well as photoacoustic image data were taken. 2D cross-sectional slices and 3D volume rendered images are shown. Simple array tiling was attempted, whereby a 48 x 48 element array was simulated, to illustrate the advantages of larger arrays. Finally, the sensitivity of the photoacoustics setup to the concentration of ink in the tube was also explored. For the sensitivity experiment a different phantom consisting of only one 1.14-mm inner diameter polyethylene tube inside a tissue mimicking material was used. The concentration of the ink inside the tube was varied and images were taken.

  5. Diamond-based capacitive micromachined ultrasonic transducers in immersion.

    Science.gov (United States)

    Cetin, Ahmet M; Bayram, Baris

    2013-02-01

    Diamond is a superior membrane material for capacitive micromachined ultrasonic transducers (CMUTs). By using ultrananocrystalline diamond (UNCD) membrane and plasma-activated wafer bonding technology, a single diamond-based circular CMUT is demonstrated and operated in immersion for the first time. The diamond-based CMUT, biased at 100 V, is excited with a 10-cycle burst of 36 V(p-p) sine signal at 3.5 MHz. Pressure generated on a 2-D plane coincident with the normal of the CMUT is measured using a broadband hydrophone. Peak-to-peak hydrophone voltage measurements along the scan area clearly indicate the main lobe and the side lobes, as theoretically predicted by our directivity function calculations. The peak-to-peak hydrophone voltage on the axial direction of the CMUT is found to be in agreement with our theoretical calculations in the Fraunhofer region (-45 mm CMUT is measured for a dc bias of 100 V, and ac excitation with 30-cycle bursts of 9, 36, and 54 V(p-p) sine signal. A peak response at 5.6 MHz is measured for all ac amplitudes. Overall, diamond is shown to be an applicable membrane for CMUT devices and applications.

  6. Habitats and Surface Construction Technology and Development Roadmap

    Science.gov (United States)

    Cohen, Marc; Kennedy, Kriss J.

    1997-01-01

    The vision of the technology and development teams at NASA Ames and Johnson Research Centers is to provide the capability for automated delivery and emplacement of habitats and surface facilities. The benefits of the program are as follows: Composites and Inflatables: 30-50% (goal) lighter than Al Hard Structures; Capability for Increased Habitable Volume, Launch Efficiency; Long Term Growth Potential; and Supports initiation of commercial and industrial expansion. Key Habitats and Surface Construction (H&SC) technology issues are: Habitat Shell Structural Materials; Seals and Mechanisms; Construction and Assembly: Automated Pro-Deploy Construction Systems; ISRU Soil/Construction Equipment: Lightweight and Lower Power Needs; Radiation Protection (Health and Human Performance Tech.); Life Support System (Regenerative Life Support System Tech.); Human Physiology of Long Duration Space Flight (Health and Human Performance Tech.); and Human Psychology of Long Duration Space Flight (Health and Human Performance Tech.) What is being done regarding these issues?: Use of composite materials for X-38 CRV, RLV, etc.; TransHAB inflatable habitat design/development; Japanese corporations working on ISRU-derived construction processes. What needs to be done for the 2004 Go Decision?: Characterize Mars Environmental Conditions: Civil Engineering, Material Durability, etc.; Determine Credibility of Inflatable Structures for Human Habitation; and Determine Seal Technology for Mechanisms and Hatches, Life Cycle, and Durability. An overview encompassing all of the issues above is presented.

  7. Exploitation of capacitive micromachined transducers for nonlinear ultrasound imaging.

    Science.gov (United States)

    Novell, Anthony; Legros, Mathieu; Felix, Nicolas; Bouakaz, Ayache

    2009-12-01

    Capacitive micromachined ultrasonic transducers (CMUTs) present advantages such as wide frequency bandwidth, which could be further developed for nonlinear imaging. However, the driving electrostatic force induces a nonlinear behavior of the CMUT, thus generating undesirable harmonic components in the generated acoustic signal. Consequently, the use of CMUT for harmonic imaging (with or without contrast agents) becomes challenging. This paper suggests 2 compensation approaches, linear and nonlinear methods, to cancel unwanted nonlinear components. Furthermore, nonlinear responses from contrast agent were evaluated using CMUT in transmit before and after compensation. The results were compared with those obtained using a PZT transducer in transmit. Results showed that CMUT nonlinear behavior is highly influenced by the excitation to bias voltage ratio. Measurements of output pressure very close to the CMUT surface allow the estimation of optimal parameters for each compensation approach. Both methods showed a harmonic reduction higher than 20 dB when one element or several elements are excited. In addition, the study demonstrates that nonlinear approach seems to be more efficient because it is shown to be less sensitive to interelement variability and further avoids fundamental component deterioration. The results from contrast agent measurements showed that the responses obtained using CMUT elements in transmit with compensation were similar to those from PZT transducer excitation. This experimental study demonstrates the opportunity to use CMUT with traditional harmonic contrast imaging techniques.

  8. 3DX: a micromachined silicon crystallographic x-ray detector

    Science.gov (United States)

    Morse, John; Kenney, Christopher J.; Westbrook, Edwin M.; Naday, Istvan; Parker, Sherwood I.

    2003-01-01

    We are developing pixel detectors for macromolecular crystallography, in which diffracted X-rays are directly absorbed by high-resistivity, crystalline silicon that has been micro-machined by inductively-coupled plasma etching. Arrays of 64 × 64 holes at 150 μm pitch are first formed by etching through the entire silicon bulk, then backfilled with polysilicon that is doped to create conducting p and n type columnar electrodes. When reverse biased, these electrodes generate electric fields that define the individual pixels. By forming conducting polysilicon on the sides of the sensors, which are cut-out of the silicon wafer by plasma etching, the entire surface of the detector may be made active. CMOS readout integrated circuits are conductively bump bonded behind each 3D detector, providing a direct connection to every pixel. A large array will be assembled with no insensitive bands along the edges by overlapping these sensors, each of area 0.96cm2. This detector will measure X-ray signal intensities of up to 105 events/pixel/sec without any pile-up loss, by using an integration method that retains the benefits of discrete photon counting. The detector sensitivity will be highly uniform, it will not exhibit any dark signal or spurious noise, and no geometric distortion will occur within each sensor.

  9. Evaluation of metrology technologies for free form surfaces

    DEFF Research Database (Denmark)

    Arámbula, K.; Siller, H.R.; De Chiffre, Leonardo

    2012-01-01

    This research work describes a novel approach for comparing different technologies for free form surface metrology: computerized tomography (CT), photogrammetry and coordinate measuring machines (CMM). The comparison has the aim of providing relevant information for the selection of metrology...... equipment when measuring free form components. Results demonstrate that there is the imperative need to assess the uncertainty and reproducibility of CT and photogrammetry measurements by applying some calibration procedures taking into account some recommendations for work piece alignment. This article...... also deals with costs issues, required standards, and necessary additional information when selecting inspection equipment....

  10. An AES Study of the Room Temperature Surface Conditioning of Technological Metal Surfaces by Electron Irradiation

    CERN Document Server

    Scheuerlein, C; Taborelli, M; Brown, A; Baker, M A

    2002-01-01

    The modifications to technological copper and niobium surfaces induced by 2.5 keV electron irradiation have been investigated in the context of the conditioning process occurring in particle accelerator ultra high vacuum systems. Changes in the elemental surface composition have been found using Scanning Auger Microscopy (SAM) by monitoring the carbon, oxygen and metal Auger peak intensities as a function of electron irradiation in the dose range 10-6 to 10-2 C mm-2. The surface analysis results are compared with electron dose dependent secondary electron and electron stimulated desorption yield measurements. Initially the electron irradiation causes a surface cleaning through electron stimulated desorption, in particular of hydrogen. During this period both the electron stimulated desorption and secondary electron yield decrease as a function of electron dose. When the electron dose exceeds 10-4 C mm-2 electron stimulated desorption yields are reduced by several orders of magnitude and the electron beam indu...

  11. Molecular-Scale Lubricants for Micromachine Applications: Final Report

    Energy Technology Data Exchange (ETDEWEB)

    Burns, A.R.; Dugger, M.T.; Houston, J.E.; Lopez, G.P.; Mayer, T.M.; Michalske, T.A.; Miller, S.L.; Sniegowski, J.J.; Stevens, M.J.; Zhou, Y.

    1998-12-01

    The nature of this work was to develop the physics and chemistry base for understanding molecular-scale lubricants used to reduce of friction- and adhesion-induced failure in silicon micromachines (MEMS). We acquired this new knowledge by tailoring the molecular properties of the lubricants, applying local probes that can directly monitor the response of lubricants in contact conditions, and evaluating the performance of model lubricants MEMS devices. Model lubricants under investigation were the silane coupling agents that form monolayer films on native oxide silicon surfaces, which is the substrate in MEMS. These molecules bind via strong surface bonds and produce a layer of hydro- or fluoro-carbon chains normal to the substrate. "Tailoring" the lubricants entails modifying the chain length, the chain chemical reactivity (H or F), and the density of chain structures. Thus much effort went into understanding the surface chemistry of silane-silicon oxide coupling. With proximal probes such as atomic force microscopy (AFM), interracial force microscopy (FM), and shear force microscopy in combination with IFM, we examined the frictional and adhesive properties of the silane films with very high spatial resolution (< 100 nm) and sensitivity. MEMS structures are treated with silanes under identical conditions, and examined for friction and adhesion under operating conditions. Proper assessment of the lubricants required quantitative analysis of MEMS performance at high speeds and long operating times. Our proximal probe measurements and WS performance analyses form a very important link for future molecular dynamics simulations, that, in turn, should be able to predict MEMS performance under all conditions.

  12. Silicon Micromachining in RF and Photonic Applications

    Science.gov (United States)

    Lin, Tsen-Hwang; Congdon, Phil; Magel, Gregory; Pang, Lily; Goldsmith, Chuck; Randall, John; Ho, Nguyen

    1995-01-01

    Texas Instruments (TI) has developed membrane and micromirror devices since the late 1970s. An eggcrate space membrane was used as the spatial light modulator in the early years. Discrete micromirrors supported by cantilever beams created a new era for micromirror devices. Torsional micromirror and flexure-beam micromirror devices were promising for mass production because of their stable supports. TI's digital torsional micromirror device is an amplitude modulator (known as the digital micromirror device (DMD) and is in production development, discussed elsewhere. We also use a torsional device for a 4 x 4 fiber-optic crossbar switch in a 2 cm x 2 cm package. The flexure-beam micromirror device is an analog phase modulator and is considered more efficient than amplitude modulators for use in optical processing systems. TI also developed millimeter-sized membranes for integrated optical switches for telecommunication and network applications. Using a member in radio frequency (RF) switch applications is a rapidly growing area because of the micromechanical device performance in microsecond-switching characteristics. Our preliminary membrane RF switch test structure results indicate promising speed and RF switching performance. TI collaborated with MIT for modeling of metal-based micromachining.

  13. In-plane diffraction loss free optical cavity using coated optical fiber and silicon micromachined spherical mirror

    Science.gov (United States)

    Sabry, Yasser; Bourouina, Tarik; Saadany, Bassam; Khalil, Diaa

    2013-03-01

    Light trapping in optical cavities has many applications in optical telecommunications, biomedical optics, atomic studies, and chemical analysis. Efficient optical coupling in these cavities is an important engineering problem that affects greatly the cavity performance. One interesting way to form an optical cavity, while simultaneously connected to the rest of the optical systems, is to use an optical fiber surface as one of the cavity mirrors while the second mirror is fabricated by MEMS technology. In this way, cavity tuning with a MEMS actuator is a simple achievable task with low cost in mass production. The main problem in this solution is the high diffraction loss associated with the small spot size at the output of the standard single-mode fiber (SMF). Diffraction loss in the cavity is usually overcome by using an expensive lensed fiber or by inserting a coated lens in the cavity leading to a long cavity with small free spectral range (FSR). In this work, we report a Fabry-Perot cavity formed by a multilayer-coated cleaved-surface SMF inserted into a grove while facing a spherical micromirror; both are fabricated by silicon micromachining. The light is trapped inside the cavity while propagating in-plane of the wafer substrate. The light is injected in and collected from a Corning SMF-28 optical fiber with a coated surface reflectivity of about 98% at 1330 nm (O-band). The silicon mirror surface is aluminum metalized with a reflectivity of about 92%. The measured cavity has a line width of 0.45 nm around 1330 nm with a FSR of 26 nm. The obtained results indicate an almost diffraction-loss free optical cavity with a quality factor close to 3000, limited by the optical surfaces reflectivity that can be improved in future by an optimized mirror fabrication process and better matching of the fiber multilayer coating.

  14. Robust Design of an Optical Micromachine for an Ophthalmic Application

    Directory of Open Access Journals (Sweden)

    Ingo Sieber

    2016-05-01

    Full Text Available This article describes an approach to the robust design of an optical micromachine consisting of a freeform optics, an amplification linkage, and an actuator. The robust design approach consists of monolithic integration principles to minimize assembly efforts and of an optimization of the functional components with respect to robustness against remaining assembly and manufacturing tolerances. The design approach presented involves the determination of the relevant tolerances arising from the domains manufacturing, assembly, and operation of the micromachine followed by a sensitivity analysis with the objective of identifying the worst offender. Subsequent to the above-described steps, an optimization of the functional design of the freeform optics with respect to a compensation of the effects of the tolerances is performed. The result leads to a robust design of the freeform optics and hence ensures a defined and optimal minimum performance of the micromachine in the presence of tolerances caused by the manufacturing processes and the operation of the micromachine. The micromachine under discussion is the tunable optics of an ophthalmic implant, an artificial accommodation system recently realized as a demonstration model at a scale of 2:1. The artificial accommodation system will be developed to replace the human crystalline lens in the case of a cataract.

  15. New Material Development for Surface Layer and Surface Technology in Tribology Science to Improve Energy Efficiency

    Science.gov (United States)

    Ismail, R.; Tauviqirrahman, M.; Jamari, Jamari; Schipper, D. J.

    2009-09-01

    This paper reviews the development of new material and surface technology in tribology and its contribution to energy efficiency. Two examples of the economic benefits, resulted from the optimum tribology in the transportation sector and the manufacturing industry are discussed. The new materials are proposed to modify the surface property by laminating the bulk material with thin layer/coating. Under a suitable condition, the thin layer on a surface can provide a combination of good wear, a low friction and corrosion resistance for the mechanical components. The innovation in layer technology results molybdenum disulfide (MoS2), diamond like carbon (DLC), cubic boron nitride (CBN) and diamond which perform satisfactory outcome. The application of the metallic coatings to carbon fibre reinforced polymer matrix composites (CFRP) has the capacity to provide considerable weight and power savings for many engineering components. The green material for lubricant and additives such as the use of sunflower oil which possesses good oxidation resistance and the use of mallee leaves as bio-degradable solvent are used to answer the demand of the environmentally friendly material with good performance. The tribology research implementation for energy efficiency also touches the simple things around us such as: erasing the laser-print in a paper with different abrasion techniques. For the technology in the engineering surface, the consideration for generating the suitable surface of the components in running-in period has been discussed in order to prolong the components life and reduce the machine downtime. The conclusion, tribology can result in reducing manufacturing time, reducing the maintenance requirements, prolonging the service interval, improving durability, reliability and mechanical components life, and reducing harmful exhaust emission and waste. All of these advantages will increase the energy efficiency and the economic benefits.

  16. Capacitive Micromachined Ultrasonic Transducers for Therapeutic Ultrasound Applications

    Science.gov (United States)

    Wong, Serena H.; Kupnik, Mario; Watkins, Ronald D.; Butts-Pauly, Kim; Khuri-Yakub, Butrus T.

    2014-01-01

    Therapeutic ultrasound guided by magnetic resonance imaging (MRI) is a noninvasive treatment that potentially reduces mortality, lowers medical costs, and widens accessibility of treatments for patients. Recent developments in the design and fabrication of capacitive micromachined ultrasonic transducers (CMUTs) have made them competitive with piezoelectric transducers for use in therapeutic ultrasound applications. In this paper, we present the first designs and prototypes of an 8-element, concentric-ring, CMUT array to treat upper abdominal cancers. This array was simulated and designed to focus 30–50 mm into tissue and ablate a 2–3 cm diameter tumor within 1 hour. Assuming a surface acoustic output pressure of 1 MPa peak to peak (8.5 W/cm2) at 2.5 MHz, we simulated an array that produced a focal intensity of 680 W/cm2 when focusing to 35 mm. CMUT cells were then designed to meet these frequency and surface acoustic intensity specifications. These cell designs were fabricated as 2.5 mm by 2.5 mm test transducers and used to verify our models. The test transducers were shown to operate at 2.5 MHz with an output pressure of 1.4 MPa peak to peak (16.3 W/cm2). With this CMUT cell design, we fabricated a full 8-element array. Due to yield issues, we only developed electronics to focus the four center elements of the array. The beam profile of the measured array deviated from the simulated because of crosstalk effects; the beamwidth matched within 10% and sidelobes increased by 2 times, which caused the measured gain to be 16.6 compared to 27.4. PMID:19628448

  17. Development of Micromachine Gas Turbine for Portable Power Generation

    Science.gov (United States)

    Isomura, Kousuke; Tanaka, Shuji; Togo, Shinichi; Kanebako, Hideki; Murayama, Motohide; Saji, Nobuyoshi; Sato, Fumihiro; Esashi, Masayoshi

    Micromachine gas turbine with centrifugal impellers of 10mm diameter fabricated by 5-axis micro-milling is under development at Tohoku University, in conjunction with Ishikawajima-Harima Heavy Industries Co., Ltd. (IHI), Tohoku-Gakuin University, and Sankyo Seiki Mfg. Co., Ltd. The development is currently at the stage of proving the feasibility of the gas turbine cycle by component tests. Micro-combustors have been developed for both hydrogen and methane fuel. Over 99.9% of the combustion efficiency has been realized in both combustors and the baseline configuration of the combustor for the gas turbine is set. A compressor of 10mm diameter has been developed as a micromachined turbocharger. The performance test of the micromachined turbocharger has been started, and ran up to 566000rpm, which is approximately 65% of the design speed. Compressor performance has been successfully measured along a constant speed line at 55% of the design speed.

  18. Silicon bulk micromachined hybrid dimensional artifact.

    Energy Technology Data Exchange (ETDEWEB)

    Claudet, Andre A.; Tran, Hy D.; Bauer, Todd Marks; Shilling, Katherine Meghan; Oliver, Andrew David

    2010-03-01

    A mesoscale dimensional artifact based on silicon bulk micromachining fabrication has been developed and manufactured with the intention of evaluating the artifact both on a high precision coordinate measuring machine (CMM) and video-probe based measuring systems. This hybrid artifact has features that can be located by both a touch probe and a video probe system with a k=2 uncertainty of 0.4 {micro}m, more than twice as good as a glass reference artifact. We also present evidence that this uncertainty could be lowered to as little as 50 nm (k=2). While video-probe based systems are commonly used to inspect mesoscale mechanical components, a video-probe system's certified accuracy is generally much worse than its repeatability. To solve this problem, an artifact has been developed which can be calibrated using a commercially available high-accuracy tactile system and then be used to calibrate typical production vision-based measurement systems. This allows for error mapping to a higher degree of accuracy than is possible with a glass reference artifact. Details of the designed features and manufacturing process of the hybrid dimensional artifact are given and a comparison of the designed features to the measured features of the manufactured artifact is presented and discussed. Measurement results from vision and touch probe systems are compared and evaluated to determine the capability of the manufactured artifact to serve as a calibration tool for video-probe systems. An uncertainty analysis for calibration of the artifact using a CMM is presented.

  19. Monolithic Micromachined Quartz Resonator based Infrared Focal Plane Arrays

    Science.gov (United States)

    2012-05-05

    prototypes of integrated micromachined IR detectors consisting of 200 μm diameter QCM resonators, 241 MHz (6.9 μm) thick 5 x 5 resonator arrays from Y-cut...of small QCM devices. • A novel measurement method for the real-time tracking of the resonance frequency based on impedance measurement around the...miniaturize QCM ? • Micromachining Quartz • Evaluation of QCM MicroArrays • Adsorption Experiments – Human Serum Albumin, IgG, and Human Fibrinogen Adsorption

  20. The Cooling and Lubrication Performance of Graphene Platelets in Micro-Machining Environments

    Science.gov (United States)

    Chu, Bryan

    The research presented in this thesis is aimed at investigating the use of graphene platelets (GPL) to address the challenges of excessive tool wear, reduced part quality, and high specific power consumption encountered in micro-machining processes. There are two viable methods of introducing GPL into micro-machining environments, viz., the embedded delivery method, where the platelets are embedded into the part being machined, and the external delivery method, where graphene is carried into the cutting zone by jetting or atomizing a carrier fluid. The study involving the embedded delivery method is focused on the micro-machining performance of hierarchical graphene composites. The results of this study show that the presence of graphene in the epoxy matrix improves the machinability of the composite. In general, the tool wear, cutting forces, surface roughness, and extent of delamination are all seen to be lower for the hierarchical composite when compared to the conventional two-phase glass fiber composite. These improvements are attributed to the fact that graphene platelets improve the thermal conductivity of the matrix, provide lubrication at the tool-chip interface and also improve the interface strength between the glass fibers and the matrix. The benefits of graphene are seen to also carry over to the external delivery method. The platelets provide improved cooling and lubrication performance to both environmentally-benign cutting fluids as well as to semi-synthetic cutting fluids used in micro-machining. The cutting performance is seen to be a function of the geometry (i.e., lateral size and thickness) and extent of oxygen-functionalization of the platelet. Ultrasonically exfoliated platelets (with 2--3 graphene layers and lowest in-solution characteristic lateral length of 120 nm) appear to be the most favorable for micro-machining applications. Even at the lowest concentration of 0.1 wt%, they are capable of providing a 51% reduction in the cutting

  1. Pipeline coating inspection in Mexico applying surface electromagnetic technology

    Energy Technology Data Exchange (ETDEWEB)

    Delgado, O.; Mousatov, A.; Nakamura, E.; Villarreal, J.M. [Instituto Mexicano del Petroleo (IMP), Mexico City (Mexico); Shevnin, V. [Moscow State University (Russian Federation); Cano, B. [Petroleos Mexicanos (PEMEX), Mexico City (Mexico)

    2009-07-01

    The main problems in the pipeline systems in Mexico include: extremely aggressive soil characterized by a high clay content and low resistivity, interconnection between several pipes, including electrical contacts of active pipelines with out of service pipes, and short distances between pipes in comparison with their depths which reduce the resolution of coating inspection. The results presented in this work show the efficiency of the Surface Electromagnetic Pipeline Inspection (SEMPI) technology to determine the technical condition of pipelines in situations before mentioned. The SEMPI technology includes two stages: regional and detailed measurements. The regional stage consists of magnetic field measurements along the pipeline using large distances (10 - 100 m) between observation points to delimit zones with damaged coating. For quantitative assessing the leakage and coating resistances along pipeline, additional measurements of voltage and soil resistivity measurements are performed. The second stage includes detailed measurements of the electric field on the pipe intervals with anomalous technical conditions identified in the regional stage. Based on the distribution of the coating electric resistance and the subsoil resistivity values, the delimitation of the zones with different grade of coating quality and soil aggressiveness are performed. (author)

  2. Surface physics of materials materials science and technology

    CERN Document Server

    Blakely, J M

    2013-01-01

    Surface Physics of Materials presents accounts of the physical properties of solid surfaces. The book contains selected articles that deal with research emphasizing surface properties rather than experimental techniques in the field of surface physics. Topics discussed include transport of matter at surfaces; interaction of atoms and molecules with surfaces; chemical analysis of surfaces; and adhesion and friction. Research workers, teachers and graduate students in surface physics, and materials scientist will find the book highly useful.

  3. Capacitive micromachined ultrasonic transducers with through-wafer interconnects

    Science.gov (United States)

    Zhuang, Xuefeng

    Capacitive micromachined ultrasonic transducer (CMUT) is a promising candidate for making ultrasound transducer arrays for applications such as 3D medical ultrasound, non-destructive evaluation and chemical sensing. Advantages of CMUTs over traditional piezoelectric transducers include low-cost batch fabrication, wide bandwidth, and ability to fabricate arrays with broad operation frequency range and different geometric configurations on a single wafer. When incorporated with through-wafer interconnects, a CMUT array can be directly integrated with a front-end integrated circuit (IC) to achieve compact packaging and to mitigate the effects of the parasitic capacitance from the connection cables. Through-wafer via is the existing interconnect scheme for CMUT arrays, and many other types of micro-electro-mechanical system (MEMS) devices. However, to date, no successful through-wafer via fabrication technique compatible with the wafer-bonding method of making CMUT arrays has been demonstrated. The through-wafer via fabrication steps degrade the surface conditions of the wafer, reduce the radius of curvature, thus making it difficult to bond. This work focuses on new through-wafer interconnect techniques that are compatible with common MEMS fabrication techniques, including both surface-micromachining and direct wafer-to-wafer fusion bonding. In this dissertation, first, a through-wafer via interconnect technique with improved characteristics is presented. Then, two implementations of through-wafer trench isolation are demonstrated. The through-wafer trench methods differ from the through-wafer vias in that the electrical conduction is through the bulk silicon instead of the conductor in the vias. In the first implementation, a carrier wafer is used to provide mechanical support; in the second, mechanical support is provided by a silicon frame structure embedded inside the isolation trenches. Both implementations reduce fabrication complexity compared to the through

  4. Selection of the surface water treatment technology - a full-scale technological investigation.

    Science.gov (United States)

    Pruss, Alina

    2015-01-01

    A technological investigation was carried out over a period of 2 years to evaluate surface water treatment technology. The study was performed in Poland, in three stages. From November 2011 to July 2012, for the first stage, flow tests with a capacity of 0.1-1.5 m³/h were performed simultaneously in three types of technical installations differing by coagulation modules. The outcome of the first stage was the choice of the technology for further investigation. The second stage was performed between September 2012 and March 2013 on a full-scale water treatment plant. Three large technical installations, operated in parallel, were analysed: coagulation with sludge flotation, micro-sand ballasted coagulation with sedimentation, coagulation with sedimentation and sludge recirculation. The capacity of the installations ranged from 10 to 40 m³/h. The third stage was also performed in a full-scale water treatment plant and was aimed at optimising the selected technology. This article presents the results of the second stage of the full-scale investigation. The critical treatment process, for the analysed water, was the coagulation in an acidic environment (6.5 < pH < 7.0) carried out in a system with rapid mixing, a flocculation chamber, preliminary separation of coagulation products, and removal of residual suspended solids through filtration.

  5. Symposium Gyro Technology 1997

    Energy Technology Data Exchange (ETDEWEB)

    Sorg, H. [ed.] [Stuttgart Univ. (Germany). Inst. A fuer Mechanik

    1997-10-01

    This volume includes the twenty papers which were presented at the Symposium Gyro Technology 1997. The subjects that have been treated during the symposium were as follows: Performance and design of silicon micromachined gyro; improved rate gyroscope designs designated for fabrication by modern deep silicon etching; micromechanical vibratory rate gyroscopes fabricated in conventional CMOS; error modelling of silicon angular rate sensor; a capacitive accelerometer as an example for surface micromachined inertial sensors; initial production results of a new family of fiber optic gyroscopes; dual-axis multiplexed open loop fiber optic gyroscope; flattely supported vibratory gyro-sensor using a Trident-type tuning fork resonator; innovative mechanizations to optimize inertial sensors for high or low rate operations; design of a planar vibratory gyroscope using electrostatic actuation and electromanetic detection; fiber optic gyro based land navigation system; FOG AHRS and AHRS/GPS navigation system: the low cost solution; GPS/GLONASS/INS-navigation (GLOGINAV); small-sized integrated system of the sea mobile objects attitude and navigation; concepts for hybrid positioning; preliminary results from a large ring laser gyroscope for fundamental physics and geophysics; a `sense of balance` - AHRS with low-cost vibrating-gyroscopes for medical diagnostics; application of strapdown inertial systems of orientation and navigation in intrapipe moving diagnostic apparatus; investigation of a digital readout system for laser gyro; the use of angular rate multiple integrals as input signals for strapdown attitude algorithms. (AKF)

  6. Unveiling the wet chemical etching characteristics of polydimethylsiloxane film for soft micromachining applications

    International Nuclear Information System (INIS)

    Kakati, A; Maji, D; Das, S

    2017-01-01

    Micromachining of a polydimethylsiloxane (PDMS) microstructure by wet chemical etching is explored for microelectromechanical systems (MEMS) and microfluidic applications. A 100 µ m thick PDMS film was patterned with different microstructure designs by wet chemical etching using a N-methyl-2-pyrrolidone (C 16 H 36 FN) and tetra-n-butylammonium fluoride (C 5 H 9 NO) mixture solution with 3:1 volume ratio after lithography for studying etching characteristics. The patterning parameters, such as etch rate, surface roughness, pH of etchant solution with time, were thoroughly investigated. A detailed study of surface morphology with etching time revealed nonlinear behaviour of the PDMS surface roughness and etch rate. A maximum rate of 1.45 µ m min −1 for 10 min etching with surface roughness of 360 nm was achieved. A new approach of wet chemical etching with pH controlled doped etchant was introduced for lower surface roughness of etched microstructures, and a constant etch rate during etching. Variation of the etching rate and surface roughness by pH controlled etching was performed by doping 5–15 gm l −1 of silicic acid (SiO 2xH2 O) into the traditional etchant solution. PDMS etching by silicic acid doped etchant solution showed a reduction in surface roughness from 400 nm to 220 nm for the same 15 µ m etching. This study is beneficial for micromachining of various MEMS and microfluidic structures such as micropillars, microchannels, and other PDMS microstructures. (paper)

  7. Development of a focused ion beam micromachining system

    Energy Technology Data Exchange (ETDEWEB)

    Pellerin, J.G.; Griffis, D.; Russell, P.E.

    1988-12-01

    Focused ion beams are currently being investigated for many submicron fabrication and analytical purposes. An FIB micromachining system consisting of a UHV vacuum system, a liquid metal ion gun, and a control and data acquisition computer has been constructed. This system is being used to develop nanofabrication and nanomachining techniques involving focused ion beams and scanning tunneling microscopes.

  8. A batch process micromachined thermoelectric energy harvester: Fabrication and characterization

    NARCIS (Netherlands)

    Su, J.; Leonov, V.; Goedbloed, M.; Andel, Y. van; Nooijer, M.C.de; Elfrink, R.; Wang, Z.; Vullers, R.J.M.

    2010-01-01

    Micromachined thermopiles are considered as a cost-effective solution for energy harvesters working at a small temperature difference and weak heat flows typical for, e.g., the human body. They can be used for powering autonomous wireless sensor nodes in a body area network. In this paper, a

  9. Micromachined palladium silver alloy membranes for hydrogen separation

    NARCIS (Netherlands)

    Tong, D.H.; Gielens, F.C.; Berenschot, Johan W.; de Boer, Meint J.; Gardeniers, Johannes G.E.; Jansen, Henricus V.; Nijdam, W.; van Rijn, C.J.M.; Elwenspoek, Michael Curt

    2002-01-01

    This paper presents wafer-scale palladium - silver alloy membranes, fabricated with a sequence of wellknown thin film and silicon micromachining techniques. The membranes have been tested in a gas permeation system to determine the hydrogen permeability and hydrogen selectivity. Typical flow rates

  10. Monitoring of yeast cell concentration using a micromachined impedance sensor

    NARCIS (Netherlands)

    Krommenhoek, E.E.; Gardeniers, Johannes G.E.; Bomer, Johan G.; van den Berg, Albert; Li, X.; Ottens, M.; van der Wielen, L.A.M.; van Dedem, G.W.K.; van Leeuwen, M.; van Gulik, W.M.; Heijnen, J.J.

    2005-01-01

    The paper describes the design, modelling and experimental characterization of a micromachined impedance sensor for on-line monitoring of the viable yeast cell concentration (biomass) in a miniaturized cell assay. Measurements in a Saccharomyces cerevisiae cell culture show that the permittivity of

  11. Utilization of the UV laser with picosecond pulses for the formation of surface microstructures on elastomeric plastics

    Science.gov (United States)

    Antoszewski, B.; Tofil, S.; Scendo, M.; Tarelnik, W.

    2017-08-01

    Elastomeric plastics belong to a wide range of polymeric materials with special properties. They are used as construction material for seals and other components in many branches of industry and, in particular, in the biomedical industry, mechatronics, electronics and chemical equipment. The micromachining of surfaces of these materials can be used to build micro-flow, insulating, dispensing systems and chemical and biological reactors. The paper presents results of research on the effects of micro-machining of selected elastomeric plastics using a UV laser emitting picosecond pulses. The authors see the prospective application of the developed technology in the sealing technique in particular to shaping the sealing pieces co-operating with the surface of the element. The result of the study is meant to show parameters of the UV laser’s performance when producing typical components such as grooves, recesses for optimum ablation in terms of quality and productivity.

  12. Optical waveguides fabricated in Cr:LiSAF by femtosecond laser micromachining

    Science.gov (United States)

    Biasetti, Demian A.; Di Liscia, Emiliano J.; Torchia, Gustavo A.

    2017-11-01

    In this work we present the fabrication of double-track type II waveguides written in 1% doped Cr:LiSrAlF6 (Cr:LiSAF) crystal by femtosecond laser micromachining. We studied waveguides fabricated at energies from 1 to 7 μJ per pulse at writing speeds of 15-45 μm/s. We found good wave-guiding performance for both, Transversal Magnetic (TM) and Transversal Electric (TE) polarization modes as well as acceptable losses according to the expected values addressed to technological applications. Also, we performed a high-resolution μ-luminescence waveguide cross-section mapping between the tracks, in order to identify possible spectral changes caused for active ions Cr3+ corresponding to the 4T2 →4A2 vibronic transition in the focal volume zone, due to induced anisotropic graded stress. Finally, their lifetimes were measured for bulk as well as for waveguide trapped ions. We found that for the range of parameters of ultra-short micromachining used, the Cr3+ ions embedded in the waveguides remained spectroscopically unchanged compared with those observed in bulk material.

  13. A Novel Piezo-Actuator-Sensor Micromachine for Mechanical Characterization of Micro-Specimens

    Directory of Open Access Journals (Sweden)

    Leila Ladani

    2010-12-01

    Full Text Available Difficulties associated with testing and characterization of materials at microscale demands for new technologies and devices that are capable of measuring forces and strains at microscale. To address this issue, a novel electroactive-based micro-electro-mechanical machine is designed. The micromachine is comprised of two electroactive (piezoelectric micro-elements mounted on a rigid frame. Electrical activation of one of the elements causes it to expand and induce a stress in the intervening micro-specimen. The response of the microspecimen to the stress is measured by the deformation and thereby voltage/resistance induced in the second electro-active element. The concept is theoretically proven using analytical modeling in conjunction with non-linear, three dimensional finite element analyses for the micromachine. Correlation of the output voltage to the specimen stiffness is shown. It is also demonstrated through finite element and analytical analysis that this technique is capable of detecting non-linear behavior of materials. A characteristic curve for an isotropic specimen exhibiting linear elastic behavior is developed. Application of the proposed device in measuring coefficient of thermal expansion is explored and analytical analysis is conducted.

  14. IC-Compatible Technologies for Optical MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Krygowski, T.W.; Sniegowski, J.J.

    1999-04-30

    Optical Micro Electro Mechanical Systems (Optical MEMS) Technology holds the promise of one-day producing highly integrated optical systems on a common, monolithic substrate. The choice of fabrication technology used to manufacture Optical MEMS will play a pivotal role in the size, functionality and ultimately the cost of optical Microsystems. By leveraging the technology base developed for silicon integrated circuits, large batches of routers, emitters, detectors and amplifiers will soon be fabricated for literally pennies per part. In this article we review the current status of technologies used for Optical MEMS, as well as fabrication technologies of the future, emphasizing manufacturable surface micromachining approaches to producing reliable, low-cost devices for optical communications applications.

  15. Fission Surface Power Technology Demonstration Unit Test Results

    Science.gov (United States)

    Briggs, Maxwell H.; Gibson, Marc A.; Geng, Steven M.; Sanzi, James L.

    2016-01-01

    The Fission Surface Power (FSP) Technology Demonstration Unit (TDU) is a system-level demonstration of fission power technology intended for use on manned missions to Mars. The Baseline FSP systems consists of a 190 kWt UO2 fast-spectrum reactor cooled by a primary pumped liquid metal loop. This liquid metal loop transfers heat to two intermediate liquid metal loops designed to isolate fission products in the primary loop from the balance of plant. The intermediate liquid metal loops transfer heat to four Stirling Power Conversion Units (PCU), each of which produce 12 kWe (48 kW total) and reject waste heat to two pumped water loops, which transfer the waste heat to titanium-water heat pipe radiators. The FSP TDU simulates a single leg of the baseline FSP system using an electrically heater core simulator, a single liquid metal loop, a single PCU, and a pumped water loop which rejects the waste heat to a Facility Cooling System (FCS). When operated at the nominal operating conditions (modified for low liquid metal flow) during TDU testing the PCU produced 8.9 kW of power at an efficiency of 21.7 percent resulting in a net system power of 8.1 kW and a system level efficiency of 17.2 percent. The reduction in PCU power from levels seen during electrically heated testing is the result of insufficient heat transfer from the NaK heater head to the Stirling acceptor, which could not be tested at Sunpower prior to delivery to the NASA Glenn Research Center (GRC). The maximum PCU power of 10.4 kW was achieved at the maximum liquid metal temperature of 875 K, minimum water temperature of 350 K, 1.1 kg/s liquid metal flow, 0.39 kg/s water flow, and 15.0 mm amplitude at an efficiency of 23.3 percent. This resulted in a system net power of 9.7 kW and a system efficiency of 18.7 percent.

  16. Biomimetic surface modification of polypropylene by surface chain transfer reaction based on mussel-inspired adhesion technology and thiol chemistry

    International Nuclear Information System (INIS)

    Niu, Zhijun; Zhao, Yang; Sun, Wei; Shi, Suqing; Gong, Yongkuan

    2016-01-01

    Highlights: • Biomimetic surface modification of PP was successfully conducted by integrating mussel-inspired technology, thiol chemistry and cell outer membranes-like structures. • The resultant biomimetic surface exhibits good interface and surface stability. • The obvious suppression of protein adsorption and platelet adhesion is also achieved. • The residue thoil groups on the surface could be further functionalized. - Abstract: Biomimetic surface modification of polypropylene (PP) is conducted by surface chain transfer reaction based on the mussel-inspired versatile adhesion technology and thiol chemistry, using 2-methacryloyloxyethylphosphorylcholine (MPC) as a hydrophilic monomer mimicking the cell outer membrane structure and 2,2-azobisisobutyronitrile (AIBN) as initiator in ethanol. A layer of polydopamine (PDA) is firstly deposited onto PP surface, which not only offers good interfacial adhesion with PP, but also supplies secondary reaction sites (-NH 2 ) to covalently anchor thiol groups onto PP surface. Then the radical chain transfer to surface-bonded thiol groups and surface re-initiated polymerization of MPC lead to the formation of a thin layer of polymer brush (PMPC) with cell outer membrane mimetic structure on PP surface. X-ray photoelectron spectrophotometer (XPS), atomic force microscopy (AFM) and water contact angle measurements are used to characterize the PP surfaces before and after modification. The protein adsorption and platelet adhesion experiments are also employed to evaluate the interactions of PP surface with biomolecules. The results show that PMPC is successfully grafted onto PP surface. In comparison with bare PP, the resultant PP-PMPC surface exhibits greatly improved protein and platelet resistance performance, which is the contribution of both increased surface hydrophilicity and zwitterionic structure. More importantly, the residue thiol groups on PP-PMPC surface create a new pathway to further functionalize such

  17. Biomimetic surface modification of polypropylene by surface chain transfer reaction based on mussel-inspired adhesion technology and thiol chemistry

    Energy Technology Data Exchange (ETDEWEB)

    Niu, Zhijun; Zhao, Yang; Sun, Wei; Shi, Suqing, E-mail: shisq@nwu.edu.cn; Gong, Yongkuan

    2016-11-15

    Highlights: • Biomimetic surface modification of PP was successfully conducted by integrating mussel-inspired technology, thiol chemistry and cell outer membranes-like structures. • The resultant biomimetic surface exhibits good interface and surface stability. • The obvious suppression of protein adsorption and platelet adhesion is also achieved. • The residue thoil groups on the surface could be further functionalized. - Abstract: Biomimetic surface modification of polypropylene (PP) is conducted by surface chain transfer reaction based on the mussel-inspired versatile adhesion technology and thiol chemistry, using 2-methacryloyloxyethylphosphorylcholine (MPC) as a hydrophilic monomer mimicking the cell outer membrane structure and 2,2-azobisisobutyronitrile (AIBN) as initiator in ethanol. A layer of polydopamine (PDA) is firstly deposited onto PP surface, which not only offers good interfacial adhesion with PP, but also supplies secondary reaction sites (-NH{sub 2}) to covalently anchor thiol groups onto PP surface. Then the radical chain transfer to surface-bonded thiol groups and surface re-initiated polymerization of MPC lead to the formation of a thin layer of polymer brush (PMPC) with cell outer membrane mimetic structure on PP surface. X-ray photoelectron spectrophotometer (XPS), atomic force microscopy (AFM) and water contact angle measurements are used to characterize the PP surfaces before and after modification. The protein adsorption and platelet adhesion experiments are also employed to evaluate the interactions of PP surface with biomolecules. The results show that PMPC is successfully grafted onto PP surface. In comparison with bare PP, the resultant PP-PMPC surface exhibits greatly improved protein and platelet resistance performance, which is the contribution of both increased surface hydrophilicity and zwitterionic structure. More importantly, the residue thiol groups on PP-PMPC surface create a new pathway to further functionalize such

  18. Capacitive Micromachined Ultrasonic Transducers (CMUTs for Underwater Imaging Applications

    Directory of Open Access Journals (Sweden)

    Jinlong Song

    2015-09-01

    Full Text Available A capacitive micromachined ultrasonic transducer structure for use in underwater imaging is designed, fabricated and tested in this paper. In this structure, a silicon dioxide insulation layer is inserted between the top electrodes and the vibration membrane to prevent ohmic contact. The capacitance-voltage (C-V characteristic curve shows that the transducer offers suitable levels of hysteresis and repeatability performance. The −6 dB center frequency is 540 kHz and the transducer has a bandwidth of 840 kHz for a relative bandwidth of 155%. Underwater pressure of 143.43 Pa is achieved 1 m away from the capacitive micromachined ultrasonic transducer under 20  excitation. Two-dimensional underwater ultrasonic imaging, which is able to prove that a rectangular object is present underwater, is achieved. The results presented here indicate that our work will be highly beneficial for the establishment of an underwater ultrasonic imaging system.

  19. Artificial intelligence: Collective behaviors of synthetic micromachines

    Science.gov (United States)

    Duan, Wentao

    Synthetic nano- and micromotors function through the conversion of chemical free energy or forms of energy into mechanical motion. Ever since the first reports, such motors have been the subject of growing interest. In addition to motility in response to gradients, these motors interact with each other, resulting in emergent collective behavior like schooling, exclusion, and predator-prey. However, most of these systems only exhibit a single type of collective behavior in response to a certain stimuli. The research projects in the disseratation aim at designing synthetic micromotors that can exhibit transition between various collective behaviors in response to different stimuli, as well as quantitative understanding on the pairwise interaction and propulsion mechanism of such motors. Chapter 1 offers an overview on development of synthetic micromachines. Interactions and collective behaviors of micromotors are also summarized and included. Chapter 2 presents a silver orthophosphate microparticle system that exhibits collective behaviors. Transition between two collective patterns, clustering and dispersion, can be triggered by shift in chemical equilibrium upon the addition or removal of ammonia, in response to UV light, or under two orthogonal stimuli (UV and acoustic field) and powering mechanisms. The transitions can be explained by the self-diffusiophoresis mechanism resulting from either ionic or neutral solute gradients. Potential applications of the reported system in logic gates, microscale pumping, and hierarchical assembly have been demonstrated. Chapter 3 introduces a self-powered oscillatory micromotor system in which active colloids form clusters whose size changes periodically. The system consists of an aqueous suspension of silver orthophosphate particles under UV radiation, in the presence of a mixture of glucose and hydrogen peroxide. The colloid particles first attract with each other to form clusters. After a lag time of around 5min, chemical

  20. High-speed Laser Micromachining with Copper Bromide Laser

    OpenAIRE

    Balchev, Ivaylo I.; Minkovski, Nikolai I.; Kostadinov, Ivan K.; Sabotinov, Nikola V.

    2006-01-01

    The application of the copper bromide (CuBr) laser as an attractive tool in the micro-machining of different materials has been demonstrated. High-quality drilling by trepanning and precision cutting was established on several materials with a negligible heat-affected zone (HAZ). That good performance was a result of the combination of high power visible radiation, short pulses, and close to the diffraction-limited laser beam quality with high-speed galvo scanner beam steering.

  1. Study on vacuum packaging reliability of micromachined quartz tuning fork gyroscopes

    Science.gov (United States)

    Fan, Maoyan; Zhang, Lifang

    2017-09-01

    Packaging technology of the micromachined quartz tuning fork gyroscopes by vacuum welding has been experimentally studied. The performance of quartz tuning fork is influenced by the encapsulation shell, encapsulation method and fixation of forks. Alloy solder thick film is widely used in the package to avoid the damage of the chip structure by the heat resistance and hot temperature, and this can improve the device performance and welding reliability. The results show that the bases and the lids plated with gold and nickel can significantly improve the airtightness and reliability of the vacuum package. Vacuum packaging is an effective method to reduce the vibration damping, improve the quality factor and further enhance the performance. The threshold can be improved nearly by 10 times.

  2. Micro-machinable polymer-derived ceramic sensors for high-temperature applications

    Science.gov (United States)

    Liu, Jian; Xu, Chengying; An, Linan

    2010-04-01

    Micro-sensors are highly desired for on-line temperature/pressure monitoring in turbine engines to improve their efficiency and reduce pollution. The biggest challenge for developing this type of sensors is that the sensors have to sustain at extreme environments in turbine engine environments, such as high-temperatures (>800 °C), fluctuated pressure and oxidation/corrosion surroundings. In this paper, we describe a class of sensors made of polymer-derived ceramics (PDCs) for such applications. PDCs have the following advantages over conventional ceramics, making them particularly suitable for these applications: (i) micromachining capability, (ii) tunable electric properties, and (iii) hightemperature capability. Here, we will discuss the materials and their properties in terms of their applications for hightemperature micro-sensors, and microfabrication technologies. In addition, we will also discuss the design of a heat-flux sensor based on polymer-derived ceramics.

  3. Micromachined On-Chip Dielectric Resonator Antenna Operating at 60 GHz

    KAUST Repository

    Sallam, Mai

    2015-06-01

    This paper presents a novel cylindrical Dielectric Resonator Antenna (DRA) suitable for millimeter-wave on-chip systems. The antenna was fabricated from a single high resistivity silicon wafer via micromachining technology. The new antenna was characterized using HFSS and experimentally with good agreement been found between the simulations and experiment. The proposed DRA has good radiation characteristics, where its gain and radiation efficiency are 7 dBi and 79.35%, respectively. These properties are reasonably constant over the working frequency bandwidth of the antenna. The return loss bandwidth was 2.23 GHz, which corresponds to 3.78% around 60 GHz. The antenna was primarily a broadside radiator with -15 dB cross polarization level.

  4. Evaluation of Coating Removal and Aggressive Surface Removal Surface Technologies Applied to Concrete Walls, Brick Walls, and Concrete Ceilings

    International Nuclear Information System (INIS)

    Ebadian, M.A.; Lagos, L.E.

    1997-01-01

    The purpose of this investigation was to test and evaluate innovative and commercially available technologies for the surface decontamination of walls and ceilings. This investigation supports the DOE's objectives of reducing risks to human health and the environment through its restoration projects at FEMP and MEMP. This project was performed at the Hemispheric Center for Environmental Technology (HCET) at Florida International University (FIU), where one innovative and four commercially available decontamination technologies were evaluated under standard, non-nuclear testing conditions. The performance data generated by this project will assist DOE site managers in the selection of the safest, most efficient, and most cost-effective decontamination technologies to accomplish their remediation objectives

  5. Parametric Surfaces Competition: Using Technology to Foster Creativity

    Science.gov (United States)

    Kaur, Manmohan; Wangler, Thomas

    2014-01-01

    Although most calculus students are comfortable with the Cartesian equations of curves and surfaces, they struggle with the concept of parameters. A multivariable calculus course is really the time to nail this concept down, once and for all, since it provides an easy way to represent many beautiful and useful surfaces, and graph them using a…

  6. Electron stimulated desorption of gases at technological surfaces of aluminium

    International Nuclear Information System (INIS)

    Ding, M.Q.; Williams, E.M.

    1989-01-01

    The release of gas by electron bombardment at aluminium alloy surfaces in vacuum -9 torr has been investigated for a range of treatments including bakeout and glow discharge cleaning. Particular attention has been given to the role of continuous electron bombardment, with current densities and electron energies of up to 1.5 mA cm -2 and 2.0 keV, respectively, over the 10 cm 2 of surface area under irradiation. The observations of desorption efficiency, defined as the number of desorbed molecules per incident electron, conform to a model involving a dynamic balance between adsorption and desorption, with contributions to adsorption from both surface and sub-surface gas. Continuous electron bombardment promotes a surface with low desorption efficiency, -5 mol/electron, however, the conditioning cycle is accelerated significantly by glow discharge treatment. There is evidence of some short-term memory when the samples are exposed to air. (author)

  7. A comparative analysis of strategic approaches for Information Technology (IT) for Commander Naval Surface Forces

    OpenAIRE

    Johnson, Devine R.

    2010-01-01

    Approved for public release; distribution is unlimited As the lead organization for all United States Naval Surface Forces, Commander Naval Surface Forces (CNSF) is committed to providing operational commanders with well-trained, highly effective, and technologically relevant surface forces. Aligning itself with the Department of the Navy's Information Management (IM) and Information Technology (IT) strategic mission objectives, CNSF is dedicated to delivering secure, interoperable, and in...

  8. First In Vivo Use of a Capacitive Micromachined Ultrasound Transducer Array–Based Imaging and Ablation Catheter

    Science.gov (United States)

    Stephens, Douglas N.; Truong, Uyen T.; Nikoozadeh, Amin; Oralkan, Ömer; Seo, Chi Hyung; Cannata, Jonathan; Dentinger, Aaron; Thomenius, Kai; de la Rama, Alan; Nguyen, Tho; Lin, Feng; Khuri-Yakub, Pierre; Mahajan, Aman; Shivkumar, Kalyanam; O’Donnell, Matt; Sahn, David J.

    2012-01-01

    Objectives The primary objective was to test in vivo for the first time the general operation of a new multifunctional intracardiac echocardiography (ICE) catheter constructed with a microlinear capacitive micromachined ultrasound transducer (ML-CMUT) imaging array. Secondarily, we examined the compatibility of this catheter with electroanatomic mapping (EAM) guidance and also as a radiofrequency ablation (RFA) catheter. Preliminary thermal strain imaging (TSI)-derived temperature data were obtained from within the endocardium simultaneously during RFA to show the feasibility of direct ablation guidance procedures. Methods The new 9F forward-looking ICE catheter was constructed with 3 complementary technologies: a CMUT imaging array with a custom electronic array buffer, catheter surface electrodes for EAM guidance, and a special ablation tip, that permits simultaneous TSI and RFA. In vivo imaging studies of 5 anesthetized porcine models with 5 CMUT catheters were performed. Results The ML-CMUT ICE catheter provided high-resolution real-time wideband 2-dimensional (2D) images at greater than 8 MHz and is capable of both RFA and EAM guidance. Although the 24-element array aperture dimension is only 1.5 mm, the imaging depth of penetration is greater than 30 mm. The specially designed ultrasound-compatible metalized plastic tip allowed simultaneous imaging during ablation and direct acquisition of TSI data for tissue ablation temperatures. Postprocessing analysis showed a first-order correlation between TSI and temperature, permitting early development temperature-time relationships at specific myocardial ablation sites. Conclusions Multifunctional forward-looking ML-CMUT ICE catheters, with simultaneous intracardiac guidance, ultrasound imaging, and RFA, may offer a new means to improve interventional ablation procedures. PMID:22298868

  9. First in vivo use of a capacitive micromachined ultrasound transducer array-based imaging and ablation catheter.

    Science.gov (United States)

    Stephens, Douglas N; Truong, Uyen T; Nikoozadeh, Amin; Oralkan, Omer; Seo, Chi Hyung; Cannata, Jonathan; Dentinger, Aaron; Thomenius, Kai; de la Rama, Alan; Nguyen, Tho; Lin, Feng; Khuri-Yakub, Pierre; Mahajan, Aman; Shivkumar, Kalyanam; O'Donnell, Matt; Sahn, David J

    2012-02-01

    The primary objective was to test in vivo for the first time the general operation of a new multifunctional intracardiac echocardiography (ICE) catheter constructed with a microlinear capacitive micromachined ultrasound transducer (ML-CMUT) imaging array. Secondarily, we examined the compatibility of this catheter with electroanatomic mapping (EAM) guidance and also as a radiofrequency ablation (RFA) catheter. Preliminary thermal strain imaging (TSI)-derived temperature data were obtained from within the endocardium simultaneously during RFA to show the feasibility of direct ablation guidance procedures. The new 9F forward-looking ICE catheter was constructed with 3 complementary technologies: a CMUT imaging array with a custom electronic array buffer, catheter surface electrodes for EAM guidance, and a special ablation tip, that permits simultaneous TSI and RFA. In vivo imaging studies of 5 anesthetized porcine models with 5 CMUT catheters were performed. The ML-CMUT ICE catheter provided high-resolution real-time wideband 2-dimensional (2D) images at greater than 8 MHz and is capable of both RFA and EAM guidance. Although the 24-element array aperture dimension is only 1.5 mm, the imaging depth of penetration is greater than 30 mm. The specially designed ultrasound-compatible metalized plastic tip allowed simultaneous imaging during ablation and direct acquisition of TSI data for tissue ablation temperatures. Postprocessing analysis showed a first-order correlation between TSI and temperature, permitting early development temperature-time relationships at specific myocardial ablation sites. Multifunctional forward-looking ML-CMUT ICE catheters, with simultaneous intracardiac guidance, ultrasound imaging, and RFA, may offer a new means to improve interventional ablation procedures.

  10. Micromachined silicon cantilevers with integrated high-frequency magnetoimpedance sensors for simultaneous strain and magnetic field detection

    Science.gov (United States)

    Buettel, G.; Joppich, J.; Hartmann, U.

    2017-12-01

    Giant magnetoimpedance (GMI) measurements in the high-frequency regime utilizing a coplanar waveguide with an integrated Permalloy multilayer and micromachined on a silicon cantilever are reported. The fabrication process is described in detail. The aspect ratio of the magnetic multilayer in the magnetoresistive and magnetostrictive device was varied. Tensile strain and compressive strain were applied. Vector network analyzer measurements in the range from the skin effect to ferromagnetic resonance confirm the technological potential of GMI-based micro-electro-mechanical devices for strain and magnetic field sensing applications. The strain-impedance gauge factor was quantified by finite element strain calculations and reaches a maximum value of almost 200.

  11. Fabrication of capacitive micromachined ultrasonic transducers based on adhesive wafer bonding technique

    International Nuclear Information System (INIS)

    Li, Zhenhao; Wong, Lawrence L P; Chen, Albert I H; Na, Shuai; Yeow, John T W; Sun, Jame

    2016-01-01

    This paper reports the fabrication process of wafer bonded capacitive micromachined ultrasonic transducers (CMUTs) using photosensitive benzocyclobutene as a polymer adhesive. Compared with direct bonding and anodic bonding, polymer adhesive bonding provides good tolerance to wafer surface defects and contamination. In addition, the low process temperature of 250 °C is compatible with standard CMOS processes. Single-element CMUTs consisting of cells with a diameter of 46 µ m and a cavity depth of 323 nm were fabricated. In-air and immersion acoustic characterizations were performed on the fabricated CMUTs, demonstrating their capability for transmitting and receiving ultrasound signals. An in-air resonance frequency of 5.47 MHz was measured by a vibrometer under a bias voltage of 300 V. (paper)

  12. Non-contact thermoacoustic detection of embedded targets using airborne-capacitive micromachined ultrasonic transducers

    Science.gov (United States)

    Nan, Hao; Boyle, Kevin C.; Apte, Nikhil; Aliroteh, Miaad S.; Bhuyan, Anshuman; Nikoozadeh, Amin; Khuri-Yakub, Butrus T.; Arbabian, Amin

    2015-02-01

    A radio frequency (RF)/ultrasound hybrid imaging system using airborne capacitive micromachined ultrasonic transducers (CMUTs) is proposed for the remote detection of embedded objects in highly dispersive media (e.g., water, soil, and tissue). RF excitation provides permittivity contrast, and ultra-sensitive airborne-ultrasound detection measures thermoacoustic-generated acoustic waves that initiate at the boundaries of the embedded target, go through the medium-air interface, and finally reach the transducer. Vented wideband CMUTs interface to 0.18 μm CMOS low-noise amplifiers to provide displacement detection sensitivity of 1.3 pm at the transducer surface. The carefully designed vented CMUT structure provides a fractional bandwidth of 3.5% utilizing the squeeze-film damping of the air in the cavity.

  13. High frequency ultrasonic imaging using thermal mechanical noise recorded on capacitive micromachined transducer arrays

    Science.gov (United States)

    Lani, Shane; Satir, Sarp; Gurun, Gokce; Sabra, Karim G.; Levent Degertekin, F.

    2011-11-01

    The cross-correlation of diffuse thermal-mechanical noise recorded by two sensors yields an estimate of the ultrasonic waves propagating between them. We used this approach at high frequencies (1-30 MHz) on a capacitive micromachined ultrasonic transducer (CMUT) ring array (d = 725 μm), monolithically integrated with low noise complementary metal oxide semiconductor electronics. The thermal-mechanical noise cross-correlations between the CMUT array elements in immersion reveal both evanescent surface waves (below 10 MHz) and waves propagating primarily in the fluid (above 10 MHz). These propagating waves may allow passive imaging of scatterers closer to the array as compared to conventional pulse-echo systems, providing potentially higher resolution.

  14. A Flexible Ultrasound Transducer Array with Micro-Machined Bulk PZT

    Directory of Open Access Journals (Sweden)

    Zhe Wang

    2015-01-01

    Full Text Available This paper proposes a novel flexible piezoelectric micro-machined ultrasound transducer, which is based on PZT and a polyimide substrate. The transducer is made on the polyimide substrate and packaged with medical polydimethylsiloxane. Instead of etching the PZT ceramic, this paper proposes a method of putting diced PZT blocks into holes on the polyimide which are pre-etched. The device works in d31 mode and the electromechanical coupling factor is 22.25%. Its flexibility, good conformal contacting with skin surfaces and proper resonant frequency make the device suitable for heart imaging. The flexible packaging ultrasound transducer also has a good waterproof performance after hundreds of ultrasonic electric tests in water. It is a promising ultrasound transducer and will be an effective supplementary ultrasound imaging method in the practical applications.

  15. Improving the Design of Capacitive Micromachined Ultrasonic Transducers Aided with Sensitivity Analysis

    Directory of Open Access Journals (Sweden)

    A Martowicz

    2016-09-01

    Full Text Available The paper presents the results of analysis performed to search for feasible design improvements for capacitive micromachined ultrasonic transducer. Carried out search has been aided with the sensitivity analysis and the application of Response Surface Method. The multiphysics approach has been taken into account in elaborated finite element model of one cell of described transducer in order to include significant physical phenomena present in modelled microdevice. The set of twelve input uncertain and design parameters consists of geometric, material and control properties. The amplitude of dynamic membrane deformation of the transducer has been chosen as studied parameter. The objective of performed study has been defined as the task of finding robust design configurations of the transducer, i.e. characterizing maximal value of deformation amplitude with its minimal variation.

  16. Pure Surface Texture Mapping Technology and it's Application for Mirror Image

    Directory of Open Access Journals (Sweden)

    Wei Feng Wang

    2013-02-01

    Full Text Available Based on the study of pure surface texture mapping technology, pure texture surface rendering method is proposed. The method is combined pure surface texture rendering and view mirror, real-time rendering has an index of refraction, reflection, and the flow of water ripple effect. Through the experimental verification of the validity of the algorithm.

  17. Technology of wear resistance increase of surface elements of friction couples using solid lubricants

    Science.gov (United States)

    Morgunov, A. P.; Masyagin, V. B.; Derkach, V. V.; Matveev, N. A.

    2017-06-01

    Based on the results of experimental investigations in wear resistance increase using lamellar solid lubricants the technology of wear resistance increase of surface elements of friction couples by applying solid lubricants is developed with the following surface plastic deformation providing enough bond strength of solid lubricant with an element surface and increasing operational life.

  18. Micromachining of buried micro channels in silicon

    NARCIS (Netherlands)

    de Boer, Meint J.; Tjerkstra, R.W.; Berenschot, Johan W.; Jansen, Henricus V.; Burger, G.J.; Burger, G.J.; Gardeniers, Johannes G.E.; Elwenspoek, Michael Curt; van den Berg, Albert

    A new method for the fabrication of micro structures for fluidic applications, such as channels, cavities, and connector holes in the bulk of silicon wafers, called buried channel technology (BCT), is presented in this paper. The micro structures are constructed by trench etching, coating of the

  19. Experimental Device for Electron Beam Micromachining

    Czech Academy of Sciences Publication Activity Database

    Dupák, Libor; Zobač, Martin; Dupák, Jan; Vlček, Ivan

    2006-01-01

    Roč. 41, 5-6 (2006), s. 272-275 ISSN 0861-4717. [EBT 2006 - International Conference on Electron Beam Technologies /8./. Varna, 05.06.2006-10.06.2006] Institutional research plan: CEZ:AV0Z20650511 Keywords : electron beam drilling * quartz glass Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

  20. Freeform micromachining of an infrared Alvarez lens

    Science.gov (United States)

    Smilie, Paul J.; Dutterer, Brian S.; Lineberger, Jennifer L.; Davies, Matthew A.; Suleski, Thomas J.

    2011-02-01

    In 1967, Luis Alvarez introduced a novel concept for a focusing lens whereby two transmitting elements with cubic polynomial surfaces yield a composite lens of variable focal length with small lateral shifts. Computer simulations have demonstrated the behavior of these devices, but fabricating the refractive cubic surfaces of the types needed with adequate precision and depth modulation has proven to be challenging using standard methods, and, to the authors' knowledge, Alvarez lens elements have not been previously machined in infrared materials. Recent developments in freeform diamond machining capability have enabled the fabrication of such devices. In this paper, we discuss the fabrication of freeform refractive Alvarez elements in germanium using diamond micro-milling on a five-axis Moore Nanotech® 350FG Freeform Generator. Machining approaches are discussed, and measurements of surface figure and finish are presented. Initial experimental tests of optical performance are also discussed.

  1. Micromachining of inertial confinement fusion targets

    International Nuclear Information System (INIS)

    Gobby, P.L.; Salzer, L.J.; Day, R.D.

    1996-01-01

    Many experiments conducted on today's largest inertial confinement fusion drive lasers require target components with sub-millimeter dimensions, precisions of a micron or less and surface finishes measured in nanometers. For metal and plastic, techniques using direct machining with diamond tools have been developed that yield the desired parts. New techniques that will be discussed include the quick-flip locator, a magnetically held kinematic mount that has allowed the direct machining of millimeter-sized beryllium hemishells whose inside and outside surface are concentric to within 0.25 micron, and an electronic version of a tracer lathe which has produced precise azimuthal variations of less than a micron

  2. A review of micromachined thermal accelerometers

    Science.gov (United States)

    Mukherjee, Rahul; Basu, Joydeep; Mandal, Pradip; Guha, Prasanta Kumar

    2017-12-01

    A thermal convection based micro-electromechanical accelerometer is a relatively new kind of acceleration sensor that does not require a solid proof mass, yielding unique benefits like high shock survival rating, low production cost, and integrability with CMOS integrated circuit technology. This article provides a comprehensive survey of the research, development, and current trends in the field of thermal acceleration sensors, with detailed enumeration on the theory, operation, modeling, and numerical simulation of such devices. Different reported varieties and structures of thermal accelerometers have been reviewed highlighting key design, implementation, and performance aspects. Materials and technologies used for fabrication of such sensors have also been discussed. Further, the advantages and challenges for thermal accelerometers vis-à-vis other prominent accelerometer types have been presented, followed by an overview of associated signal conditioning circuitry and potential applications.

  3. Ultrawide continuously tunable 1.55-μm vertical air-cavity wavelength-selective elements for VCSELs using micromachined electrostatic actuation

    Science.gov (United States)

    Hillmer, Hartmut H.; Daleiden, Juergen; Prott, Cornelia; Roemer, Friedhard; Irmer, Soeren; Ataro, Edwin; Tarraf, Amer; Gutermuth, D.; Kommallein, I.; Strassner, Martin

    2003-08-01

    Surface-micromachined 1.55μm vertical-resonator-based devices, capable of wide, continuous, monotonic and kink-free tuning are designed, technologically implemented and characterized. Tuning is achieved by mechanically actuating one or several membranes in a vertical resonator including two ultra-highly reflective DBR mirrors. The tuning is controlled by a single parameter (actuation voltage). The two different layers composing the mirrors reveal a very strong refractive index contrast. Filters including InP/air-gap DBR's (3.5 periods) using GaInAs sacrificial layers reveal a continuous tuning of up to 9% of the absolute wavelength. Varying a reverse voltage (U=0 .. -3.2V) between the membranes, a tuning range up to 142nm was obtained by electrostatic actuation. The correlation of the wavelength and the applied voltage is accurately reproducible without any hysteresis. Theoretical model calculations are performed for symmetric and asymmetric device structures, varying layer thickness and compositions. Models of highly sophisticated color tuning can be found in nature, e.g. in tunable spectral light filtering by trogon and butterfly wings. Bionics transfers the principles of success of nature into natural science, engineering disciplines and applications (here filters and VCSELs for optical communication on the basis of WDM). Light interferes constructively and destructively with nano- and microstructures of appropriate shape, dimensions and materials, both in the artificial DBR structures fabricated in our labs as well as in the natural ones.

  4. Investigation on the micromilled surface characterization through replica technology

    DEFF Research Database (Denmark)

    Baruffi, Federico; Parenti, P.; Cacciatore, F.

    2016-01-01

    with quality control and tolerances to meet the parts functionality. However, in many cases, the reduced accessibility caused by the part complex features (e.g. microcavities, micro-holes, deep-cores) prevents from performing a direct measurement of the surface, using both contactand non-contact techniques...

  5. Applying WEPP technologies to western alkaline surface coal mines

    Science.gov (United States)

    J. Q. Wu; S. Dun; H. Rhee; X. Liu; W. J. Elliot; T. Golnar; J. R. Frankenberger; D. C. Flanagan; P. W. Conrad; R. L. McNearny

    2011-01-01

    One aspect of planning surface mining operations, regulated by the National Pollutant Discharge Elimination System (NPDES), is estimating potential environmental impacts during mining operations and the reclamation period that follows. Practical computer simulation tools are effective for evaluating site-specific sediment control and reclamation plans for the NPDES....

  6. Micromachining. CERN Courier, Jul-Aug 1995, v. 35(5)

    International Nuclear Information System (INIS)

    Wilson, Martin

    1995-01-01

    Full text: As well as making microcircuit components, X-ray lithography can also be used to make very small mechanical parts, either by using directly the exposed and developed photoresist, or as a mould to produce the component in another material such as ceramic or metal. In this revolutionary technology, metal components are made via the LIGA (Lithographic Galvanoformung und Abformung) technique in which the exposed and developed photoresist is coated with a conducting material and then electroplated, after which the resist is stripped away. In addition to fine size and precision resolution, X-rays offer the advantage of deep penetration and small scattering through the resist, so that patterns may be up to a millimetre deep, with very accurate straightness in directions parallel to the beam. Micromachining via LIGA was developed at KfK Karlsruhe; commercialization and further development is being vigorously pursued by the Institut fur Mikrotechnik in Mainz and by Microparts GmbH in Karlsruhe. Significant developments have been made at the Synchrotron Radiation Centre in Madison, Wisconsin, with new programmes start-ing at SRRC (Taiwan), CAMD (Baton Rouge, Louisiana), and LURE (Paris). There is now an active European Special Interest Group for LIGA. Commercially manufactured micromachines are starting to be used in sensors and connectors. The ability to integrate microdevices with microelectronics raises many interesting possibilities for the future, notably in medicine and for intelligent sensors. In all cases, however, widespread adoption will be governed by the ability to mass-produce cheaply, requiring high volume production. The high intensities of synchrotron radiation will assist in achieving these large throughputs

  7. Technologies for protection of the Space Station power system surfaces in atomic oxygen environment

    Science.gov (United States)

    Nahra, Henry K.; Rutledge, Sharon K.

    1988-01-01

    Technologies for protecting Space Station surfaces from degradation caused by atomic oxygen are discussed, stressing protection of the power system surfaces. The Space Station power system is described and research concerning the solar array surfaces and radiator surfaces is examined. The possibility of coating the solar array sufaces with a sputter deposited thin film of silicon oxide containing small concentrations of polytetrafluoroethylene is presented. Hexamethyldisiloxane coating for these surfaces is also considered. For the radiator surfaces, possible coatings include silver teflon thermal coating and zinc orthotitanate.

  8. Measurement of surface crack length using image processing technology

    International Nuclear Information System (INIS)

    Nahm, Seung Hoon; Kim, Si Cheon; Kim, Yong Il; Ryu, Dae Hyun

    2001-01-01

    The development of a new experimental method is required to easily observe the growth behavior of fatigue cracks. To satisfy the requirement, an image processing technique was introduced to fatigue testing. The length of surface fatigue crack could be successfully measured by the image processing system. At first, the image data of cracks were stored into the computer while the cyclic loading was interrupted. After testing, crack length was determined using image processing software which was developed by ourselves. Block matching method was applied to the detection of surface fatigue cracks. By comparing the data measured by image processing system with the data measured by manual measurement with a microscope, the effectiveness of the image processing system was established. If the proposed method is used to monitor and observe the crack growth behavior automatically, the time and efforts for fatigue test could be dramatically reduced

  9. The application of confocal technology based on polycapillary X-ray optics in surface topography

    International Nuclear Information System (INIS)

    Zhao, Guangcui; Sun, Tianxi; Liu, Zhiguo; Yuan, Hao; Li, Yude; Liu, Hehe; Zhao, Weigang; Zhang, Ruixia; Min, Qin; Peng, Song

    2013-01-01

    A confocal micro-X-ray fluorescence (MXRF) technology based on polycapillary X-ray optics was proposed for determining surface topography. This confocal topography method involves elemental sensitivity and can be used to classify the objects according to their elemental composition while obtaining their surface topography. To improve the spatial resolution of this confocal topography technology, the center of the confocal micro-volume was overlapped with the output focal spot of the polycapillary X-ray, focusing the lens in the excitation channel. The input focal spot of the X-ray lens parallel to the detection channel was used to determine the surface position of the sample. The corresponding surface adaptive algorithm was designed to obtain the surface topography. The surface topography of a ceramic chip was obtained. This confocal MXRF surface topography method could find application in the materials sciences

  10. Design, simulation and testing of capacitive micromachined ultrasound transducer-based phospholipidic biosensor elements

    International Nuclear Information System (INIS)

    Sapeliauskas, E; Vanagas, G; Barauskas, D; Mikolajunas, M; Pakenas, E; Pelenis, D; Sergalis, G; Jukna, T; Virzonis, D

    2015-01-01

    In this study we present theoretical proof of the principle of using interdigital capacitive micromachined ultrasound transducers (CMUT IDTs) for the detection of phospholipid membrane elasticity. Proof of principle was needed to find out whether the new type of microelectromechanical sensors of the toxins incorporated with the lipid membranes was feasible. CMUT IDTs for 10 MHz operation in water, with 146 µm spaced double fingers were designed and fabricated using the surface micromachining technique. Fabricated CMUTs were tested for their resonance in air and for Scholte-type wave transmission in deionized water and isopropanol solutions containing 0%, 10% and 20% water. The amplitude and phase velocity of the excited and received Scholte waves were measured in a 200 µm height microchannel, capped with a thick layer of soft polymer, which suppressed the production of non-informative guided waves. It was determined that the average sensitivity of Scholte wave phase velocity within the given range of solution concentrations is 2.9 m s −1 per one percent. Experimental data were also used to verify the adequacy of the finite element model, which was found to be suitable for reliable prediction of the phospholipid membrane elasticity impact on the Scholte wave phase velocity or the resonance frequency in the present IDT structure. It was determined that for the analyzed conditions (the elasticity of simulated phospholipid membrane changed from 1 to 5 GPa) the sensitivity of the measurement channel is expected to be no worse than 2 kHz GPa −1 in terms of the Scholte wave and CMUT IDT resonance frequency. This leads to a positive conclusion on the feasibility of the new sensor type. (paper)

  11. Design, simulation and testing of capacitive micromachined ultrasound transducer-based phospholipidic biosensor elements

    Science.gov (United States)

    Sapeliauskas, E.; Vanagas, G.; Barauskas, D.; Mikolajunas, M.; Pakenas, E.; Pelenis, D.; Sergalis, G.; Jukna, T.; Virzonis, D.

    2015-07-01

    In this study we present theoretical proof of the principle of using interdigital capacitive micromachined ultrasound transducers (CMUT IDTs) for the detection of phospholipid membrane elasticity. Proof of principle was needed to find out whether the new type of microelectromechanical sensors of the toxins incorporated with the lipid membranes was feasible. CMUT IDTs for 10 MHz operation in water, with 146 µm spaced double fingers were designed and fabricated using the surface micromachining technique. Fabricated CMUTs were tested for their resonance in air and for Scholte-type wave transmission in deionized water and isopropanol solutions containing 0%, 10% and 20% water. The amplitude and phase velocity of the excited and received Scholte waves were measured in a 200 µm height microchannel, capped with a thick layer of soft polymer, which suppressed the production of non-informative guided waves. It was determined that the average sensitivity of Scholte wave phase velocity within the given range of solution concentrations is 2.9 m s-1 per one percent. Experimental data were also used to verify the adequacy of the finite element model, which was found to be suitable for reliable prediction of the phospholipid membrane elasticity impact on the Scholte wave phase velocity or the resonance frequency in the present IDT structure. It was determined that for the analyzed conditions (the elasticity of simulated phospholipid membrane changed from 1 to 5 GPa) the sensitivity of the measurement channel is expected to be no worse than 2 kHz GPa-1 in terms of the Scholte wave and CMUT IDT resonance frequency. This leads to a positive conclusion on the feasibility of the new sensor type.

  12. Proton beam micromachining on PMMA, Foturan and CR-39 materials

    CERN Document Server

    Rajta, I; Kiss, A Z; Gomez-Morilla, I; Abraham, M H

    2003-01-01

    Proton Beam Micromachining was demonstrated at the Institute of Nuclear Research of the Hungarian Academy of Sciences using three different types of resists: PMMA, Foturan and CR-39 type Solid State Nuclear Track Detector material. Irradiations have been performed on the nuclear microprobe facility at ATOMKI. The beam scanning was done using a National Instruments (NI) card (model 6711), and the new C++ version of the program IonScan, developed specifically for PBM applications called IonScan 2.0. (R.P.)

  13. Capacitive micromachined ultrasonic transducer arrays as tunable acoustic metamaterials

    International Nuclear Information System (INIS)

    Lani, Shane W.; Sabra, Karim G.; Wasequr Rashid, M.; Hasler, Jennifer; Levent Degertekin, F.

    2014-01-01

    Capacitive Micromachined Ultrasonic Transducers (CMUTs) operating in immersion support dispersive evanescent waves due to the subwavelength periodic structure of electrostatically actuated membranes in the array. Evanescent wave characteristics also depend on the membrane resonance which is modified by the externally applied bias voltage, offering a mechanism to tune the CMUT array as an acoustic metamaterial. The dispersion and tunability characteristics are examined using a computationally efficient, mutual radiation impedance based approach to model a finite-size array and realistic parameters of variation. The simulations are verified, and tunability is demonstrated by experiments on a linear CMUT array operating in 2-12 MHz range

  14. Capacitive micromachined ultrasonic transducer arrays as tunable acoustic metamaterials

    Energy Technology Data Exchange (ETDEWEB)

    Lani, Shane W., E-mail: shane.w.lani@gmail.com, E-mail: karim.sabra@me.gatech.edu, E-mail: levent.degertekin@me.gatech.edu; Sabra, Karim G. [George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, 801Ferst Drive, Georgia 30332-0405 (United States); Wasequr Rashid, M.; Hasler, Jennifer [School of Electrical and Computer Engineering, Georgia Institute of Technology, Van Leer Electrical Engineering Building, 777 Atlantic Drive NW, Atlanta, Georgia 30332-0250 (United States); Levent Degertekin, F. [George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, 801Ferst Drive, Georgia 30332-0405 (United States); School of Electrical and Computer Engineering, Georgia Institute of Technology, Van Leer Electrical Engineering Building, 777 Atlantic Drive NW, Atlanta, Georgia 30332-0250 (United States)

    2014-02-03

    Capacitive Micromachined Ultrasonic Transducers (CMUTs) operating in immersion support dispersive evanescent waves due to the subwavelength periodic structure of electrostatically actuated membranes in the array. Evanescent wave characteristics also depend on the membrane resonance which is modified by the externally applied bias voltage, offering a mechanism to tune the CMUT array as an acoustic metamaterial. The dispersion and tunability characteristics are examined using a computationally efficient, mutual radiation impedance based approach to model a finite-size array and realistic parameters of variation. The simulations are verified, and tunability is demonstrated by experiments on a linear CMUT array operating in 2-12 MHz range.

  15. Development of capacitive Micromachined Ultrasonic Transducer (III) - Performance Test

    Energy Technology Data Exchange (ETDEWEB)

    Kim, Ki Bok; Ahn, Bong Young; Park, Hae Won; Kim, Young Joo; Lee, Seung Seok [Korea Research Institute of Standards and Science, Daejeon (Korea, Republic of)

    2004-12-15

    In this study, the capacitive micromachined ultrasonic transducer(cMUT) was developed based on the previous research results. The cross sectional image of the developed cMUT was characterized. To measure the membrane displacement of the cMUT, the Michelson phase modulation fiber interferometer was constructed. The measured membrane displacement was in good agreement with the result of the finite element analysis. To estimate the ultrasonic wave generated by the cMUT, an ultrasonic system including a pulser, receiver and charge amplifier was used. The cMUT developed in this study shows a good performance and hence will be widely used in the non-contact ultrasonic applications

  16. Capacitive micromachined ultrasonic transducer arrays as tunable acoustic metamaterials

    Science.gov (United States)

    Lani, Shane W.; Wasequr Rashid, M.; Hasler, Jennifer; Sabra, Karim G.; Levent Degertekin, F.

    2014-02-01

    Capacitive Micromachined Ultrasonic Transducers (CMUTs) operating in immersion support dispersive evanescent waves due to the subwavelength periodic structure of electrostatically actuated membranes in the array. Evanescent wave characteristics also depend on the membrane resonance which is modified by the externally applied bias voltage, offering a mechanism to tune the CMUT array as an acoustic metamaterial. The dispersion and tunability characteristics are examined using a computationally efficient, mutual radiation impedance based approach to model a finite-size array and realistic parameters of variation. The simulations are verified, and tunability is demonstrated by experiments on a linear CMUT array operating in 2-12 MHz range.

  17. Development of capacitive Micromachined Ultrasonic Transducer (III) - Performance Test

    International Nuclear Information System (INIS)

    Kim, Ki Bok; Ahn, Bong Young; Park, Hae Won; Kim, Young Joo; Lee, Seung Seok

    2004-01-01

    In this study, the capacitive micromachined ultrasonic transducer(cMUT) was developed based on the previous research results. The cross sectional image of the developed cMUT was characterized. To measure the membrane displacement of the cMUT, the Michelson phase modulation fiber interferometer was constructed. The measured membrane displacement was in good agreement with the result of the finite element analysis. To estimate the ultrasonic wave generated by the cMUT, an ultrasonic system including a pulser, receiver and charge amplifier was used. The cMUT developed in this study shows a good performance and hence will be widely used in the non-contact ultrasonic applications

  18. Photothermal self-excitation of the micromachined resonators

    Science.gov (United States)

    Churenkov, Alexander V.; Kozel, Stanislav M.; Listvin, Vladimir N.

    1990-07-01

    Recently interest has grown to the physical quantities fibre-optic sensors in which a micromachined resonator acts as a sensitive element. This resonator can change the resonant frequency when acted upon by an outside force. Energy supply necessary for the resonator excitation and transfer of information about the outer action are accomplished by optical fibres, that can be present in the zone of a higher aggressiveness, strong electromagnetic interferences atc. The frequency output of such sensors is easily processed by digital systems and is insensitive to signal level.

  19. Micromachined silicon grisms for infrared optics.

    Science.gov (United States)

    Mar, Douglas J; Marsh, Jasmina P; Deen, Casey P; Ling, Hao; Choo, Hosung; Jaffe, Daniel T

    2009-02-20

    We demonstrate the successful fabrication of large format (approximately 50 mm × 50 mm) gratings in monolithic silicon for use as high-efficiency grisms at infrared wavelengths. The substrates for the grisms were thick (8-16 mm) disks of precisely oriented single-crystal silicon (refractive index, n ~ 3.42). We used microlithography and chemical wet etching techniques to produce the diffraction gratings on one side of these substrates. These techniques permitted the manufacture of coarse grooves (as few as 7 grooves/mm) with precise control of the blaze angle and groove profile and resulted in excellent groove surface quality. Profilometric measurements of the groove structure of the gratings confirm that the physical dimensions of the final devices closely match their design values. Optical performance of these devices exceeds the specifications required for diffraction-limited performance (RMS wave surface error silicon transmits well, the blaze control and high index permit high-resolution, high-order dispersion in a compact space. The first application of these grisms is to provide FORCAST, a mid-infrared camera on NASA's airborne observatory, with a moderate resolution (R=100-1000) spectroscopic capability.

  20. Predictive modeling, simulation, and optimization of laser processing techniques: UV nanosecond-pulsed laser micromachining of polymers and selective laser melting of powder metals

    Science.gov (United States)

    Criales Escobar, Luis Ernesto

    Institute for Standards & Technology via response surface methodology techniques. The main goal of this research is to develop a comprehensive predictive model with which the effect of powder material properties and laser process parameters on the built quality and integrity of SLM-produced parts can be better understood. By optimizing process parameters, SLM as an additive manufacturing technique is not only possible, but also practical and reproducible.

  1. Efficacy of liquid and foam decontamination technologies for chemical warfare agents on indoor surfaces.

    Science.gov (United States)

    Love, Adam H; Bailey, Christopher G; Hanna, M Leslie; Hok, Saphon; Vu, Alex K; Reutter, Dennis J; Raber, Ellen

    2011-11-30

    Bench-scale testing was used to evaluate the efficacy of four decontamination formulations on typical indoor surfaces following exposure to the liquid chemical warfare agents sarin (GB), soman (GD), sulfur mustard (HD), and VX. Residual surface contamination on coupons was periodically measured for up to 24h after applying one of four selected decontamination technologies [0.5% bleach solution with trisodium phosphate, Allen Vanguard Surface Decontamination Foam (SDF™), U.S. military Decon Green™, and Modec Inc. and EnviroFoam Technologies Sandia Decontamination Foam (DF-200)]. All decontamination technologies tested, except for the bleach solution, performed well on nonporous and nonpermeable glass and stainless-steel surfaces. However, chemical agent residual contamination typically remained on porous and permeable surfaces, especially for the more persistent agents, HD and VX. Solvent-based Decon Green™ performed better than aqueous-based bleach or foams on polymeric surfaces, possibly because the solvent is able to penetrate the polymer matrix. Bleach and foams out-performed Decon Green for penetrating the highly polar concrete surface. Results suggest that the different characteristics needed for an ideal and universal decontamination technology may be incompatible in a single formulation and a strategy for decontaminating a complex facility will require a range of technologies. Copyright © 2011 Elsevier B.V. All rights reserved.

  2. Hydrophobic and superhydrophobic surfaces fabricated using atmospheric pressure cold plasma technology: A review.

    Science.gov (United States)

    Dimitrakellis, Panagiotis; Gogolides, Evangelos

    2018-03-29

    Hydrophobic surfaces are often used to reduce wetting of surfaces by water. In particular, superhydrophobic surfaces are highly desired for several applications due to their exceptional properties such as self-cleaning, anti-icing, anti-friction and others. Such surfaces can be prepared via numerous methods including plasma technology, a dry technique with low environmental impact. Atmospheric pressure plasma (APP) has recently attracted significant attention as lower-cost alternative to low-pressure plasmas, and as a candidate for continuous rather than batch processing. Although there are many reviews on water-repellent surfaces, and a few reviews on APP technology, there are hardly any review works on APP processing for hydrophobic and superhydrohobic surface fabrication, a topic of high importance in nanotechnology and interface science. Herein, we critically review the advances on hydrophobic and superhydrophobic surface fabrication using APP technology, trying also to give some perspectives in the field. After a short introduction to superhydrophobicity of nanostructured surfaces and to APPs we focus this review on three different aspects: (1) The atmospheric plasma reactor technology used for fabrication of (super)hydrophobic surfaces. (2) The APP process for hydrophobic surface preparation. The hydrophobic surface preparation processes are categorized methodologically as: a) activation, b) grafting, c) polymerization, d) roughening and hydrophobization. Each category includes subcategories related to different precursors used. (3) One of the most important sections of this review concerns superhydrophobic surfaces fabricated using APP. These are methodologically characterized as follows: a) single step processes where micro-nano textured topography and low surface energy coating are created at the same time, or b) multiple step processes, where these steps occur sequentially in or out of the plasma. We end the review with some perspectives in the field. We

  3. Antisoiling technology: Theories of surface soiling and performance of antisoiling surface coatings

    Science.gov (United States)

    Cuddihy, E. F.; Willis, P. B.

    1984-11-01

    Physical examination of surfaces undergoing natural outdoor soiling suggests that soil matter accumulates in up to three distinct layers. The first layer involves strong chemical attachment or strong chemisorption of soil matter on the primary surface. The second layer is physical, consisting of a highly organized arrangement of soil creating a gradation in surface energy from a high associated with the energetic first layer to the lowest possible state on the outer surfce of the second layer. The lowest possible energy state is dictated by the physical nature of the regional atmospheric soiling materials. These first two layers are resistant to removal by rain. The third layer constitutes a settling of loose soil matter, accumulating in dry periods and being removed during rainy periods. Theories and evidence suggest that surfaces that should be naturally resistant to the formation of the first two-resistant layers should be hard, smooth, hydrophobic, free of first-period elements, and have the lowest possible surface energy. These characteristics, evolving as requirements for low-soiling surfaces, suggest that surfaces or surface coatings should be of fluorocarbon chemistry. Evidence for the three-soil-layer concept, and data on the positive performance of candidate fluorocarbon coatings on glass and transparent plastic films after 28 months of outdoor exposure, are presented.

  4. Functional properties of bio-inspired surfaces: characterization and technological applications

    National Research Council Canada - National Science Library

    Favret, Eduardo A; Fuentes, Néstor O

    2009-01-01

    ... technological materials. It analyses how such surfaces can be described and characterized using microscopic techniques and thus reproduced, encompassing the important areas of current surface replication techniques and the associated acquisition of good master structures. It is well known that biological systems have the ability to sense, ...

  5. Topochip: technology for instructing cell fate and morphology via designed surface topography

    NARCIS (Netherlands)

    Hulshof, G.F.B.

    2016-01-01

    The control of biomaterial surface topography is emerging as a tool to influence cells and tissues. Due to a lack a theoretical framework of the underlying molecular mechanisms, high-throughput screening (HTS) technology is valuable to identify and study bioactive surface topographies. To identify

  6. Application of laser tracker technology for measuring optical surfaces

    Science.gov (United States)

    Zobrist, Tom L.

    The pages of this dissertation detail the development of an advanced metrology instrument for measuring large optical surfaces. The system is designed to accurately guide the fabrication of the Giant Magellan Telescope and future telescopes through loose-abrasive grinding. The instrument couples a commercial laser tracker with an advanced calibration technique and a set of external references to mitigate a number of error sources. The system is also required to work as a verification test for the GMT principal optical interferometric test of the polished mirror segment to corroborate the measurements in several low-order aberrations. A set of system performance goals were developed to ensure that the system will achieve these purposes. The design, analysis, calibration results, and measurement performance of the Laser Tracker Plus system are presented in this dissertation.

  7. Evaluation of Coating Removal and Aggressive Surface Removal Surface Technologies Applied to Concrete Walls, Brick Walls, and Concrete Ceilings

    Energy Technology Data Exchange (ETDEWEB)

    Lagos, L.E.; Ebadian, M.A.

    1997-11-01

    The purpose of this investigation was to test and evaluate innovative and commercially available technologies for the surface decontamination of walls and ceilings. This investigation supports the DOE's objectives of reducing risks to human health and the environment through its restoration projects at FEMP and MEMP. This project was performed at the Hemispheric Center for Environmental Technology (HCET) at Florida International University (FIU), where one innovative and four commercially available decontamination technologies were evaluated under standard, non-nuclear testing conditions. The performance data generated by this project will assist DOE site managers in the selection of the safest, most efficient, and most cost-effective decontamination technologies to accomplish their remediation objectives.

  8. Fabrication and Characterization of Capacitive Micromachined Ultrasonic Transducers with Low-Temperature Wafer Direct Bonding

    Directory of Open Access Journals (Sweden)

    Xiaoqing Wang

    2016-12-01

    Full Text Available This paper presents a fabrication method of capacitive micromachined ultrasonic transducers (CMUTs by wafer direct bonding, which utilizes both the wet chemical and O2plasma activation processes to decrease the bonding temperature to 400 °C. Two key surface properties, the contact angle and surface roughness, are studied in relation to the activation processes, respectively. By optimizing the surface activation parameters, a surface roughness of 0.274 nm and a contact angle of 0° are achieved. The infrared images and static deflection of devices are assessed to prove the good bonding effect. CMUTs having silicon membranes with a radius of 60 μm and a thickness of 2 μm are fabricated. Device properties have been characterized by electrical and acoustic measurements to verify their functionality and thus to validate this low-temperature process. A resonant frequency of 2.06 MHz is obtained by the frequency response measurements. The electrical insertion loss and acoustic signal have been evaluated. This study demonstrates that the CMUT devices can be fabricated by low-temperature wafer direct bonding, which makes it possible to integrate them directly on top of integrated circuit (IC substrates.

  9. Advantage Clean & Porous TM new technological methods of surface treatment of dental implants

    Directory of Open Access Journals (Sweden)

    Лев Ильич Винников

    2015-02-01

    Full Text Available The purpose of this study was a comparative analysis of the surfaces of dental implants treated with technological methods SLA and RBM to identify their positive and negative characteristics. Based on these results to develop a new process Clean & Porous surface treatment of dental implants to obtain highly, rough and porous surface, which is characteristic for the technology SLA, and absolutely clean surface characteristic of technology RBM, without their disadvantages (unwarranted complete removal of abrasive particles SLA case and the absence of a clear structure of the surface topography in the case of RBM.The structure and purity of the implant surface Straumann, Alfa-Bio, DIO, Finish Line. studied in micrographs obtained by an electron microscope (SEM at the University of Technion (increase 500,2000,3000. To study the chemical properties of the samples, the method of X-ray energy dispersive spectroscopy (EDS, based on an analysis of its X-ray emission energy spectrum.Comparative analysis of the implant surfaces treated with the methods and RBM SLA showed that despite the reliability of these methods, each of them has certain disadvantages (contamination cases alumina particle surface with sufficient structural SLA and craters on the surface organized RBM. Developed by Finish Line Materials and Processes Ltd new technology of surface treatment of dental implants Clean & PorousTM, combining the best characteristics of the methods of SLA and RBM, possible to obtain a well-structured and absolutely clean surface.The proposed new original method Clean & PorousTM treatment of dental implants meet the criteria (roughness, porosity and surface finish of the implant, which provide an ideal osseointegration. Since osseointegration is a key issue in modern implantology it enables to obtain reliable primary fixation of the implant in the bone. From a clinical point of view it reduces the healing of the implant, as well as creating conditions

  10. Capacitive micromachined ultrasonic resonator for ultra sensitive trace gas detection

    Science.gov (United States)

    Ge, Li-Feng

    2013-01-01

    The ultra-sensitive trace gas detection has become increasingly important due to the demand for environment and sci-tech progress. In recent years a capacitive micromachined ultrasonic transducer (CMUT) with circular diaphragms used for imaging has been successfully used to detect chemical gases, and shows promising results. However, its behavior is the same as that of CMUTs for ranging, imaging and therapy applications, where the acoustic radiation with a certain power, produced by the vibration of circular diaphragms operating at the first bending mode, is required but is undesirable for gas sensing since it disturbs inevitably the environment to be measured. This paper, therefore, presents to optimize its behavior after an ideal capacitive micromachined ultrasonic resonator (CMUR) and then to utilize second-order and high-order bending modes of the circular diaphragm to minimize its acoustic radiation and obtain higher resonance frequency also. Since the resonance frequencies of high-order modes much higher than the fundamental frequency, an ultra-high operating frequency of GHz can be reached so that raising greatly the sensitivity of the CMUR and being able to realize the ultra-sensitive trace gas detections.

  11. Parametric studies on the nanosecond laser micromachining of the materials

    Science.gov (United States)

    Tański, M.; Mizeraczyk, J.

    2016-12-01

    In this paper the results of an experimental studies on nanosecond laser micromachining of selected materials are presented. Tested materials were thin plates made of aluminium, silicon, stainless steel (AISI 304) and copper. Micromachining of those materials was carried out using a solid state laser with second harmonic generation λ = 532 nm and a pulse width of τ = 45 ns. The effect of laser drilling using single laser pulse and a burst of laser pulses, as well as laser cutting was studied. The influence of laser fluence on the diameter and morphology of a post ablation holes drilled with a single laser pulse was investigated. The ablation fluence threshold (Fth) of tested materials was experimentally determined. Also the drilling rate (average depth per single laser pulse) of holes drilled with a burst of laser pulses was determined for all tested materials. The studies of laser cutting process revealed that a groove depth increases with increasing average laser power and decreasing cutting speed. It was also found that depth of the laser cut grooves is a linear function of number of repetition of a cut. The quantitative influence of those parameters on the groove depth was investigated.

  12. Hybrid micromachining using a nanosecond pulsed laser and micro EDM

    International Nuclear Information System (INIS)

    Kim, Sanha; Chung, Do Kwan; Shin, Hong Shik; Chu, Chong Nam; Kim, Bo Hyun

    2010-01-01

    Micro electrical discharge machining (micro EDM) is a well-known precise machining process that achieves micro structures of excellent quality for any conductive material. However, the slow machining speed and high tool wear are main drawbacks of this process. Though the use of deionized water instead of kerosene as a dielectric fluid can reduce the tool wear and increase the machine speed, the material removal rate (MRR) is still low. In contrast, laser ablation using a nanosecond pulsed laser is a fast and non-wear machining process but achieves micro figures of rather low quality. Therefore, the integration of these two processes can overcome the respective disadvantages. This paper reports a hybrid process of a nanosecond pulsed laser and micro EDM for micromachining. A novel hybrid micromachining system that combines the two discrete machining processes is introduced. Then, the feasibility and characteristics of the hybrid machining process are investigated compared to conventional EDM and laser ablation. It is verified experimentally that the machining time can be effectively reduced in both EDM drilling and milling by rapid laser pre-machining prior to micro EDM. Finally, some examples of complicated 3D micro structures fabricated by the hybrid process are shown

  13. Cell Surface and Membrane Engineering: Emerging Technologies and Applications

    Directory of Open Access Journals (Sweden)

    Christopher T. Saeui

    2015-06-01

    Full Text Available Membranes constitute the interface between the basic unit of life—a single cell—and the outside environment and thus in many ways comprise the ultimate “functional biomaterial”. To perform the many and often conflicting functions required in this role, for example to partition intracellular contents from the outside environment while maintaining rapid intake of nutrients and efflux of waste products, biological membranes have evolved tremendous complexity and versatility. This article describes how membranes, mainly in the context of living cells, are increasingly being manipulated for practical purposes with drug discovery, biofuels, and biosensors providing specific, illustrative examples. Attention is also given to biology-inspired, but completely synthetic, membrane-based technologies that are being enabled by emerging methods such as bio-3D printers. The diverse set of applications covered in this article are intended to illustrate how these versatile technologies—as they rapidly mature—hold tremendous promise to benefit human health in numerous ways ranging from the development of new medicines to sensitive and cost-effective environmental monitoring for pathogens and pollutants to replacing hydrocarbon-based fossil fuels.

  14. Micromachined chemical sensor with integrated microelectronics

    International Nuclear Information System (INIS)

    Smith, J.; Sniegowski, J.; Koehler, D.; Ricco, T.; Martin, S.; McWhorter, P.

    1992-01-01

    With today's continued emphasis on environmental safety and health issues, a resurgence of interest has developed in the area of chemical sensors. These sensors would typically be used to monitor contamination hazards such as underground storage tanks or to assess previous contamination at waste disposal sites. Human exposure to chemical hazards can also be monitored. Additionally, these sensors can be used as part of a manufacturing process control loop. One type of sensor suitable for gas phase monitoring of chemicals is the quartz resonator or quartz crystal microbalance (QCM) sensor. In this type of sensor, a thickness shear mode (TSM) quartz resonator is coated with a film that interacts with the chemical species of interest. Changes in the mass and elasticity of this film are reflected as changes in the resonant properties of the device. Therefore, the presence of the species of interest can be detected by monitoring the frequency of an oscillator based on the resonance of the quartz. These QCM sensors compete with surface acoustic wave (SAW) devices as a means for monitoring gas phase species. SAW devices are typically more sensitive to small amounts of a species, but the instrumentation associated with a SAW device is an order of magnitude more expensive than the instrumentation associated with a TSM wave resonator since the SAW devices operate in the 100's of MHz frequency regime while quartz resonators operate in the 5--25 MHz regime. We are working to improve the sensitivity of the QCM sensor by increasing the frequency of the device to 25 MHz (compared to the typical 5 MHz crystal) and by increasing the frequency stability of the system to an ultimate goal of 0.1 Hz. The 25 MHz QCM has already been achieved and once the stability goal is achieved, the QCM will have the same sensitivity as a SAW device

  15. Technology of magnetic abrasive finishing in machining of difficult-to-machine alloy complex surface

    Directory of Open Access Journals (Sweden)

    Fujian MA

    2016-10-01

    Full Text Available The technology of magnetic abrasive finishing is one of the important finishing technologies. Combining with low-frequency vibration and ultrasonic vibration, it can attain higher precision, quality and efficiency. The characteristics and the related current research of magnetic abrasive finishing, vibration assisted magnetic abrasive finishing and ultrasonic assisted magnetic abrasive finishing are introduced. According to the characteristics of the difficult-to-machine alloy's complex surface, the important problems for further study are presented to realize the finishing of complex surface with the technology of magnetic abrasive finishing, such as increasing the machining efficiency by enhancing the magnetic flux density of machining gap and compounding of magnetic energy and others, establishing of the control function during machining and the process planning method for magnetic abrasive finishing of complex surface under the space geometry restraint of complex surface on magnetic pole, etc.

  16. Advanced surface technology a holistic view on the extensive and intertwined world of applied surface engineering

    CERN Document Server

    Moller, Per

    2013-01-01

    These two volumes serve as an inclusive and practical reference in manufacturing as well as a comprehensive text for university-level course work. Before delving into the variety of conventional and emerging surface finishing processes available to the 21st century practitioner, the authors cover the principles behind the processes, including wear and other mechanical properties, corrosion and electrochemistry. Throughout, the material also covers testing, property measurement and a generic introduction to basically all surface relevant characterization techniques, keyed to the specific process and application under discussion.

  17. Comprehensive investigation of the corrosion and surface chemical effects of the decontamination technologies

    International Nuclear Information System (INIS)

    Szabo-Nagy, Andrea; Varga, Kalman; Deak-Horvath, Emese; Nemeth, Zoltan; Horvath, David; Schunk, Janos; Patek, Gabor

    2012-09-01

    Decontamination technologies are mainly developed to reduce the collective dose of the maintenance personnel at NPPs. The highest efficiency (i.e., the highest DF values) available without detrimental modification of the treated surface of structural material is the most important goal in the course of the application of a decontamination technology. A so-called 'soft' chemical decontamination technology has been developed - supported by the Paks Nuclear Power Plant - at the Institute of Radiochemistry and Radioecology of the University of Pannonia. The novel base technology can be effectively applied for the decontamination of the heat exchanger tubes of steam generators. In addition, by optimizing the main technological parameters (temperature, concentration of the liquid chemicals, flow rates, contact time, etc.) it can be utilized for specific applications such as decontamination of some dismountable devices and separable equipment or the total decontamination prior to plant dismantling (decommissioning) in the future. The aim of this work is to compare the efficiency, corrosion and surface chemical effects of some improved versions of the novel base-technology elaborated for decontamination of austenitic stainless steel surfaces. The experiments have been performed at laboratory conditions in decontamination model systems. The applied methods: γ-spectrometry, ICP-OES, voltammetry and SEM-EDX. The experimental results revealed that the efficiency of the base-technology mainly depends on the surface features of the stainless steel samples such as the chemical composition and thickness of the oxide layer, the nature (quantity, morphology and chemical composition) of the crystalline deposits. It has been documented that the improved version of the base-technology are suitable for the decontamination of both steel surfaces covered by chemically resistant large Cr-content crystals and that having compact oxide-layers (up to a thickness of 10

  18. Technology of surface wastewater purification, including high-rise construction areas

    Science.gov (United States)

    Tsyba, Anna; Skolubovich, Yury

    2018-03-01

    Despite on the improvements in the quality of high-rise construction areas and industrial wastewater treatment, the pollution of water bodies continues to increase. This is due to the organized and unorganized surface untreated sewage entry into the reservoirs. The qualitative analysis of some cities' surface sewage composition is carried out in the work. Based on the published literature review, the characteristic contamination present in surface wastewater was identified. The paper proposes a new technology for the treatment of surface sewage and presents the results of preliminary studies.

  19. New and Emerging Technologies for Real-Time Air and Surface Beryllium Monitoring

    Energy Technology Data Exchange (ETDEWEB)

    Phifer, B.E. Jr.; Churnetski, E.L.; Cooke, L.E.; Reed, J.J.; Howell, M.L.; Smith, V.D.

    2001-09-01

    In this study, five emerging technologies were identified for real-time monitoring of airborne beryllium: Microwave-Induced Plasma Spectroscopy (MIPS), Aerosol Beam-Focused Laser-Induced Plasma Spectroscopy (ABFLIPS), Laser-Induced Breakdown Spectroscopy (LIBS), Surfaced-Enhanced Raman Scattering (SERS) Spectroscopy, and Micro-Calorimetric Spectroscopy (CalSpec). Desired features of real-time air beryllium monitoring instrumentation were developed from the Y-12 CBDPP. These features were used as guidelines for the identification of potential technologies as well as their unique demonstrated capability to provide real-time monitoring of similar materials. However, best available technologies were considered, regardless of their ability to comply with the desired features. None of the five technologies have the capability to measure the particle size of airborne beryllium. Although reducing the total concentration of airborne beryllium is important, current literature suggests that reducing or eliminating the concentration of respirable beryllium is critical for worker health protection. Eight emerging technologies were identified for surface monitoring of beryllium. CalSpec, MIPS, SERS, LIBS, Laser Ablation, Absorptive Stripping Voltametry (ASV), Modified Inductively Coupled Plasma (ICP) Spectroscopy, and Gamma BeAST. Desired features of real-time surface beryllium monitoring were developed from the Y-12 CBDPP. These features were used as guidelines for the identification of potential technologies. However, the best available technologies were considered regardless of their ability to comply with the desired features.

  20. Etching characteristics of Si{110} in 20 wt% KOH with addition of hydroxylamine for the fabrication of bulk micromachined MEMS

    Science.gov (United States)

    Rao, A. V. Narasimha; Swarnalatha, V.; Pal, P.

    2017-12-01

    Anisotropic wet etching is a most widely employed for the fabrication of MEMS/NEMS structures using silicon bulk micromachining. The use of Si{110} in MEMS is inevitable when a microstructure with vertical sidewall is to be fabricated using wet anisotropic etching. In most commonly employed etchants (i.e. TMAH and KOH), potassium hydroxide (KOH) exhibits higher etch rate and provides improved anisotropy between Si{111} and Si{110} planes. In the manufacturing company, high etch rate is demanded to increase the productivity that eventually reduces the cost of end product. In order to modify the etching characteristics of KOH for the micromachining of Si{110}, we have investigated the effect of hydroxylamine (NH2OH) in 20 wt% KOH solution. The concentration of NH2OH is varied from 0 to 20% and the etching is carried out at 75 °C. The etching characteristics which are studied in this work includes the etch rates of Si{110} and silicon dioxide, etched surface morphology, and undercutting at convex corners. The etch rate of Si{110} in 20 wt% KOH + 15% NH2OH solution is measured to be four times more than that of pure 20 wt% KOH. Moreover, the addition of NH2OH increases the undercutting at convex corners and enhances the etch selectivity between Si and SiO2.

  1. Two-dimensional capacitive micromachined ultrasonic transducer (CMUT) arrays for a miniature integrated volumetric ultrasonic imaging system

    Science.gov (United States)

    Zhuang, Xuefeng; Wygant, Ira O.; Yeh, David T.; Nikoozadeh, Amin; Oralkan, Omer; Ergun, Arif S.; Cheng, Ching-Hsiang; Huang, Yongli; Yaralioglu, Goksen G.; Khuri-Yakub, Butrus T.

    2005-04-01

    We have designed, fabricated, and characterized two-dimensional 16x16-element capacitive micromachined ultrasonic transducer (CMUT) arrays. The CMUT array elements have a 250-μm pitch, and when tested in immersion, have a 5 MHz center frequency and 99% fractional bandwidth. The fabrication process is based on standard silicon micromachining techniques and therefore has the advantages of high yield, low cost, and ease of integration. The transducers have a Si3N4 membrane and are fabricated on a 400-μm thick silicon substrate. A low parasitic capacitance through-wafer via connects each CMUT element to a flip-chip bond pad on the back side of the wafer. Each through wafer via is 20 μm in diameter and 400 μm deep. The interconnects form metal-insulator-semiconductor (MIS) junctions with the surrounding high-resistivity silicon substrate to establish isolation and to reduce parasitic capacitance. Each through-wafer via has less than 0.06 pF of parasitic capacitance. We have investigated a Au-In flip-chip bonding process to connect the 2D CMUT array to a custom integrated circuit (IC) with transmit and receive electronics. To develop this process, we fabricated fanout structures on silicon, and flip-chip bonded these test dies to a flat surface coated with gold. The average series resistance per bump is about 3 Ohms, and 100% yield is obtained for a total of 30 bumps.

  2. Short-pulse-width micromachining of hard materials using DPSS Nd:YAG lasers

    Science.gov (United States)

    Heglin, Michael; Govorkov, Sergei V.; Scaggs, Michael J.; Theoharidis, Haris; Schoelzel, T.

    2002-06-01

    The material processing of an industrial, short-pulse duration DPPS YAG laser producing peak powers greater than 0.2MW is discussed in this paper. This peak power provides sufficient materials processing capability to meet the micro machining needs in the automotive, semiconductor, micro- electronic, medical and telecommunication industries. All hard and soft materials including: plastics, metals, ceramics, diamond and other crystalline materials are suitable candidates for the processing capability of this laser. Micro level features can be machined in these materials to a depth in excess of 1mm with high quality results. In most applications feature sizes can be achieved that are not possible or economical with existing technologies. The optical beam delivery system requirements, and overall micro-machining set-up are also described. The drilling and cutting versatility down to feature sizes of less than 7 micrometers , as well as, complex shapes are shown. The wavelength, pulse length, and peakpower are described and relate to their effect on recast, micro-cracking and material removal rates. Material removal effects related to progressive penetration into the material will be reviewed. The requirements of this DPSS laser technology to meet the operational requirements for high duty cycle operation in industrial environments is covered along with processing flexibility and lower operating cost.

  3. Compact Micromachined Infrared Bandpass Filters for Planetary Spectroscopy

    Science.gov (United States)

    Merrell, Willie C., II; Aslam, Shahid; Brown, Ari D.; Chervenak, James A.; Huang, Wei-Chung; Quijada, Manuel; Wollack, Edward

    2011-01-01

    The future needs of space based observational planetary and astronomy missions include low mass and small volume radiometric instruments that can operate in high radiation and low temperature environments. Here we focus on a central spectroscopic component, the bandpass filter. We model the bandpass response of the filters to target the wavelength of the resonance peaks at 20, 40, and 60 micrometers and report good agreement between the modeled and measured response. We present a technique of using common micromachining processes for semiconductor fabrication to make compact, free standing resonant metal mesh filter arrays with silicon support frames. The process can accommodate multiple detector array architectures and the silicon frame provides lightweight mechanical support with low form factor. We also present a conceptual hybridization of the filters with a detector array.

  4. Characterization of bulk-micromachined direct-bonded silicon nanofilters

    Science.gov (United States)

    Tu, Jay K.; Huen, Tony; Szema, Robert; Ferrari, Mauro

    1998-03-01

    The ability to separate 30-100 nm particles - nanofiltration - is critical for many biomedical applications. Where this filtration needs to be absolute, such as for viral elimination in the blood fractionation process, the large variations in pore size found with conventional polymeric filters can lead to the unwanted presence of viruses in the filtrate. To overcome this problem, we have developed a filter with micromachined channels sandwiched between two bonded silicon wafers. These channels are formed through the selective deposition and then removal of a thermally-grown oxide, the thickness of which can be controlled to +/- 4 percent for 30 nm pores. In this paper, we will present both the gas and liquid characterization, and the filtration studies done on 44 and 100 nm beads.

  5. A Micro-Machined Gyroscope for Rotating Aircraft

    Directory of Open Access Journals (Sweden)

    Fuxue Zhang

    2012-07-01

    Full Text Available In this paper we present recent work on the design, fabrication by silicon micromachining, and packaging of a new gyroscope for stabilizing the autopilot of rotating aircraft. It operates based on oscillation of the silicon pendulum between two torsion girders for detecting the Coriolis force. The oscillation of the pendulum is initiated by the rolling and deflecting motion of the rotating carrier. Therefore, the frequency and amplitude of the oscillation are proportional to the rolling frequency and deflecting angular rate of the rotating carrier, and are measured by the sensing electrodes. A modulated pulse with constant amplitude and unequal width is obtained by a linearizing process of the gyroscope output signal and used to control the deflection of the rotating aircraft. Experimental results show that the gyroscope has a resolution of 0.008 °/s and a bias of 56.18 °/h.

  6. Compact Micromachined Bandpass Filters for Infrared Planetary Spectroscopy

    Science.gov (United States)

    Brown, Ari D.; Aslam, Shahid; Chervenak, James A.; Huang, Wei-Chung; Merrell, Willie; Quijada, Manuel

    2011-01-01

    The thermal instrument strawman payload of the Jupiter Europa Orbiter on the Europa Jupiter Science Mission will map out thermal anomalies, the structure, and atmospheric conditions of Europa and Jupiter within the 7-100 micron spectral range. One key requirement for the payload is that the mass cannot exceed 3.7 kg. Consequently, a new generation of light-weight miniaturized spectrometers needs to be developed. On the path toward developing these spectrometers is development of ancillary miniaturized spectroscopic components. In this paper, we present a strategy for making radiation hard and low mass FIR band pass metal mesh filters. Our strategy involves using MEMS-based fabrication techniques, which will permit the quasi-optical filter structures to be made with micron-scale precision. This will enable us to achieve tight control over both the pass band of the filter and the micromachined silicon support structure architecture, which will facilitate integration of the filters for a variety of applications.

  7. Sub-band-gap laser micromachining of lithium niobate

    DEFF Research Database (Denmark)

    Christensen, F. K.; Müllenborn, Matthias

    1995-01-01

    Laser processing of insulators and semiconductors is usually realized using photon energies exceeding the band-gap energy. This makes laser processing of insulators difficult since high photon energies typically require either a pulsed laser or a frequency-doubled continuous-wave laser. A new...... method is reported which enables us to do laser processing of lithium niobate using sub-band-gap photons. Using high scan speeds, moderate power densities, and sub-band-gap photon energies results in volume removal rates in excess of 106µm3/s. This enables fast micromachining of small piezoelectric...... structures, or simple etching of grooves for precision positioning of optical fibers. ©1995 American Institute of Physics....

  8. Q-Switched Nd: YAG Laser Micro-Machining System

    International Nuclear Information System (INIS)

    Messaoud, S.; Allam, A.; Siserir, F.; Bouceta, Y.; Kerdja, T.; Ouadjaout, D.

    2008-01-01

    In this paper, we present the design of a low cost Q-switched Nd: YAG laser micro-machining system for photo masks fabrication. It consists of: Nd:YAG laser source, beam delivery system, X-Y table, PC, The CCD camera and TV monitor. The synchronization between the laser source and the X-Y table is realised by NI PCI-7342, the two axis MID-7602 and LabVIEW based program. The first step of this work consists of engraving continuous and discontinuous lines on a thin film metal with a 100 μm resolution by using the YG 980 Quantel Q-switched Nd:YAG laser.

  9. Micromachined hot-wire thermal conductivity probe for biomedical applications.

    Science.gov (United States)

    Yi, Ming; Panchawagh, Hrishikesh V; Podhajsky, Ronald J; Mahajan, Roop L

    2009-10-01

    This paper presents the design, fabrication, numerical simulation, and experimental validation of a micromachined probe that measures thermal conductivity of biological tissues. The probe consists of a pair of resistive line heating elements and resistance temperature detector sensors, which were fabricated by using planar photolithography on a glass substrate. The numerical analysis revealed that the thermal conductivity and diffusivity can be determined by the temperature response induced by the uniform heat flux in the heating elements. After calibrating the probe using a material (agar gel) of known thermal conductivity, the probe was deployed to calculate the thermal conductivity of Crisco. The measured value is in agreement with that determined by the macro-hot-wire probe method to within 3%. Finally, the micro thermal probe was used to investigate the change of thermal conductivity of pig liver before and after RF ablation treatment. The results show an increase in thermal conductivity of liver after the RF ablation.

  10. Characterization of a Silicon-Micromachined Thermal Shear-Stress Sensor

    National Research Council Canada - National Science Library

    Sheplak, Mark; Chandrasekaran, Venkataraman; Cain, Anthony; Nishida, Toshikazu; Cattafesta, Louis N

    2002-01-01

    A detailed characterization is presented of a silicon-micromachined thermal shear-stress sensor employing a thin-film platinum-sensing element on top of a silicon-nitride membrane that is stretched over a vacuum cavity...

  11. Laser micro-machined semi-slinky like MEMS structures: Novel interface coolers

    Science.gov (United States)

    Çelen, Serap

    2012-10-01

    Laser micro-machining has recently been considered a precision and reproducible manufacturing technique in MEMS fabrication because of the superior characteristics of a focused laser beam. It is not only a unique tool but also an invisible optical drill. The aim of the present paper is two-fold: to manufacture novel miniaturized titanium 3D MEMS surface structures in order to increase the cooling performance. Second is to find the behaviors of the operational parameters which controlling the laser-material interaction mechanisms and also suggest the best adjustments in order to achieve this novel semi-slinky like spiral MEMS surface structures with using a 20 W ytterbium fiber laser. Pure titanium micro-MEMS product which has novel interface coolers was manufactured using a ytterbium fiber laser (λ=1060 nm) with 40 ns pulse duration. Best adjustments were, respectively, the pulse duration: 40 ns, the pulse energy: 0.4 mJ, the laser scanning speed: 336.1 mm/s, the peak power density: 17.46 * 108 W/cm2.

  12. Study of surfactant-added TMAH for applications in DRIE and wet etching-based micromachining

    Science.gov (United States)

    Tang, B.; Shikida, M.; Sato, K.; Pal, P.; Amakawa, H.; Hida, H.; Fukuzawa, K.

    2010-06-01

    In this paper, etching anisotropy is evaluated for a number of different crystallographic orientations of silicon in a 0.1 vol% Triton-X-100 added 25 wt% tetramethylammonium hydroxide (TMAH) solution using a silicon hemisphere. The research is primarily aimed at developing advanced applications of wet etching in microelectromechanical systems (MEMS). The etching process is carried out at different temperatures in the range of 61-81 °C. The etching results of silicon hemisphere and different shapes of three-dimensional structures in {1 0 0}- and {1 1 0}-Si surfaces are analyzed. Significantly important anisotropy, different from a traditional etchant (e.g. pure KOH and TMAH), is investigated to extend the applications of the wet etching process in silicon bulk micromachining. The similar etching behavior of exact and vicinal {1 1 0} and {1 1 1} planes in TMAH + Triton is utilized selectively to remove the scalloping from deep reactive-ion etching (DRIE) etched profiles. The direct application of the present research is demonstrated by fabricating a cylindrical lens with highly smooth etched surface finish. The smoothness of a micro-lens at different locations is measured qualitatively by a scanning electron microscope and quantitatively by an atomic force microscope. The present paper provides a simple and effective fabrication method of the silicon micro-lens for optical MEMS applications.

  13. Free-standing double-layer terahertz band-pass filters fabricated by femtosecond laser micro-machining.

    Science.gov (United States)

    Lin, Yanzhang; Yao, Haizi; Ju, Xuewei; Chen, Ying; Zhong, Shuncong; Wang, Xiangfeng

    2017-10-16

    We report on the fabrication and transmission properties of free-standing single-layer and double-layer THz bandpass filters. These filters are fabricated on aluminum foils using femtosecond laser micro-machining. The aluminum foils are periodically patterned with cross apertures with a total area of 1.75×1.75 cm 2 , also known as frequency-selective surfaces. Their terahertz transmission properties were simulated using the FDTD method and measured using a time-domain terahertz spectroscopy system. The simulation results agree with the measurements results very well. The performance of single-layer bandpass filters is as good as the commercial equivalents on the market. The double-layer filters show extraordinary transmission peaks with changing spacing between the two layers. We show the contour map of the electric field distribution across the apertures, and ascribe the new transmission peaks to the interference and coupling of surface plasmon polaritons between the two layers.

  14. Electron collisions with atoms, ions, molecules, and surfaces: Fundamental science empowering advances in technology

    Science.gov (United States)

    Bartschat, Klaus; Kushner, Mark J.

    2016-06-01

    Electron collisions with atoms, ions, molecules, and surfaces are critically important to the understanding and modeling of low-temperature plasmas (LTPs), and so in the development of technologies based on LTPs. Recent progress in obtaining experimental benchmark data and the development of highly sophisticated computational methods is highlighted. With the cesium-based diode-pumped alkali laser and remote plasma etching of Si3N4 as examples, we demonstrate how accurate and comprehensive datasets for electron collisions enable complex modeling of plasma-using technologies that empower our high-technology-based society.

  15. Oriented coupling of major histocompatibility complex (MHC) to sensor surfaces using light assisted immobilisation technology

    DEFF Research Database (Denmark)

    Snabe, Torben; Røder, Gustav Andreas; Neves-Petersen, Maria Teresa

    2005-01-01

    histocompatibility complex (MHC class I) to a sensor surface is presented. The coupling was performed using light assisted immobilisation--a novel immobilisation technology which allows specific opening of particular disulphide bridges in proteins which then is used for covalent bonding to thiol-derivatised surfaces...... via a new disulphide bond. Light assisted immobilisation specifically targets the disulphide bridge in the MHC-I molecule alpha(3)-domain which ensures oriented linking of the complex with the peptide binding site exposed away from the sensor surface. Structural analysis reveals that a similar...

  16. Modern technologies for improving cleaning and disinfection of environmental surfaces in hospitals

    Directory of Open Access Journals (Sweden)

    John M. Boyce

    2016-04-01

    Full Text Available Abstract Experts agree that careful cleaning and disinfection of environmental surfaces are essential elements of effective infection prevention programs. However, traditional manual cleaning and disinfection practices in hospitals are often suboptimal. This is often due in part to a variety of personnel issues that many Environmental Services departments encounter. Failure to follow manufacturer’s recommendations for disinfectant use and lack of antimicrobial activity of some disinfectants against healthcare-associated pathogens may also affect the efficacy of disinfection practices. Improved hydrogen peroxide-based liquid surface disinfectants and a combination product containing peracetic acid and hydrogen peroxide are effective alternatives to disinfectants currently in widespread use, and electrolyzed water (hypochlorous acid and cold atmospheric pressure plasma show potential for use in hospitals. Creating “self-disinfecting” surfaces by coating medical equipment with metals such as copper or silver, or applying liquid compounds that have persistent antimicrobial activity surfaces are additional strategies that require further investigation. Newer “no-touch” (automated decontamination technologies include aerosol and vaporized hydrogen peroxide, mobile devices that emit continuous ultraviolet (UV-C light, a pulsed-xenon UV light system, and use of high-intensity narrow-spectrum (405 nm light. These “no-touch” technologies have been shown to reduce bacterial contamination of surfaces. A micro-condensation hydrogen peroxide system has been associated in multiple studies with reductions in healthcare-associated colonization or infection, while there is more limited evidence of infection reduction by the pulsed-xenon system. A recently completed prospective, randomized controlled trial of continuous UV-C light should help determine the extent to which this technology can reduce healthcare-associated colonization and infections

  17. Anodic bonding using SOI wafer for fabrication of capacitive micromachined ultrasonic transducers

    International Nuclear Information System (INIS)

    Bellaredj, M; Bourbon, G; Walter, V; Moal, P Le; Berthillier, M

    2014-01-01

    In medical ultrasound imaging, mostly piezoelectric crystals are used as ultrasonic transducers. Capacitive micromachined ultrasonic transducers (CMUTs) introduced around 1994 have been shown to be a good alternative to conventional piezoelectric transducers in various aspects, such as sensitivity, transduction efficiency or bandwidth. This paper focuses on a fabrication process for CMUTs using anodic bonding of a silicon on insulator wafer on a glass wafer. The processing steps are described leading to a good control of the mechanical response of the membrane. This technology makes possible the fabrication of large membranes and can extend the frequency range of CMUTs to lower frequencies of operation. Silicon membranes having radii of 50, 70, 100 and 150 µm and a 1.5 µm thickness are fabricated and electromechanically characterized using an auto-balanced bridge impedance analyzer. Resonant frequencies from 0.6 to 2.3 MHz and an electromechanical coupling coefficient around 55% are reported. The effects of residual stress in the membranes and uncontrolled clamping conditions are clearly responsible for the discrepancies between experimental and theoretical values of the first resonance frequency. The residual stress in the membranes is determined to be between 90 and 110 MPa. The actual boundary conditions are between the clamped condition and the simply supported condition and can be modeled with a torsional stiffness of 2.10 −7  Nm rad –1  in the numerical model. (paper)

  18. Economical and technological study of surface grinding versus face milling in hardened AISI D3 steel machining operations

    OpenAIRE

    Vila Pastor, Carlos; Siller, H.R.; Rodríguez, C.A.; BRUSCAS BELLIDO, GRACIA-MARIA; Serrano, J.

    2012-01-01

    This work deals with the technological and economic considerations required to select face milling vs. surface grinding operations in the manufacture of hardened steel flat surfaces for dies and moulds. In terms of technological considerations, factors such as component geometry, material and surface quality (dimensional tolerance and surface finish) are taken into account. The economic considerations include the cost of machine depreciation, labour and consumables (cutting tools in face mill...

  19. Development of a multi-band photoacoustic tomography imaging system based on a capacitive micromachined ultrasonic transducer array.

    Science.gov (United States)

    Zhang, Jian; Pun, Sio Hang; Yu, Yuanyu; Gao, Duyang; Wang, Jiujiang; Mak, Peng Un; Lei, Kin Fong; Cheng, Ching-Hsiang; Yuan, Zhen

    2017-05-10

    Photoacoustic tomography (PAT) as a hybrid technology combines the high optical contrast and high acoustic resolution in a single imaging modality. However, most of the available PAT systems cannot comprehensively or accurately characterize biological systems at multiple length scales due to the use of narrow bandwidth commercial ultrasonic transducers. In this study, we fabricated a novel multi-band capacitive micromachined ultrasonic transducer (CMUT) array, and first developed a CMUT-based multi-band photoacoustic tomography (MBPAT) imaging system. The MBPAT imaging system was examined by the phantom experiment, and then was successfully applied to image the zebrafish in vivo. The imaging results indicated that CMUT-array-based MBPAT can provide a more comprehensive and accurate characterization of biological tissues, which exhibit the potential of MBPAT/CMUT in various areas of biomedical imaging.

  20. Hypersonic force measurements using internal balance based on optical micromachined Fabry-Perot interferometry

    Science.gov (United States)

    Qiu, Huacheng; Min, Fu; Zhong, Shaolong; Song, Xin; Yang, Yanguang

    2018-03-01

    Force measurements using wind tunnel balance are necessary for determining a variety of aerodynamic performance parameters, while the harsh environment in hypersonic flows requires that the measurement instrument should be reliable and robust, in against strong electromagnetic interference, high vacuum, or metal (oxide) dusts. In this paper, we demonstrated a three-component internal balance for hypersonic aerodynamic force measurements, using novel optical micromachined Fabry-Perot interferometric (FPI) strain gauges as sensing elements. The FPI gauges were fabricated using Micro-Opto-Electro-Mechanical Systems (MOEMS) surface and bulk fabrication techniques. High-reflectivity coatings are used to form a high-finesse Fabry-Perot cavity, which benefits a high resolution. Antireflective and passivation coatings are used to reduce unwanted interferences. The FPI strain gauge based balance has been calibrated and evaluated in a Mach 5 hypersonic flow. The results are compared with the traditional technique using the foil resistive strain gauge balance, indicating that the proposed balance based on the MOEMS FPI strain gauge is reliable and robust and is potentially suitable for the hypersonic wind tunnel harsh environment.

  1. Planar Indium Tin Oxide Heater for Improved Thermal Distribution for Metal Oxide Micromachined Gas Sensors.

    Science.gov (United States)

    Çakır, M Cihan; Çalışkan, Deniz; Bütün, Bayram; Özbay, Ekmel

    2016-09-29

    Metal oxide gas sensors with integrated micro-hotplate structures are widely used in the industry and they are still being investigated and developed. Metal oxide gas sensors have the advantage of being sensitive to a wide range of organic and inorganic volatile compounds, although they lack selectivity. To introduce selectivity, the operating temperature of a single sensor is swept, and the measurements are fed to a discriminating algorithm. The efficiency of those data processing methods strongly depends on temperature uniformity across the active area of the sensor. To achieve this, hot plate structures with complex resistor geometries have been designed and additional heat-spreading structures have been introduced. In this work we designed and fabricated a metal oxide gas sensor integrated with a simple square planar indium tin oxide (ITO) heating element, by using conventional micromachining and thin-film deposition techniques. Power consumption-dependent surface temperature measurements were performed. A 420 °C working temperature was achieved at 120 mW power consumption. Temperature distribution uniformity was measured and a 17 °C difference between the hottest and the coldest points of the sensor at an operating temperature of 290 °C was achieved. Transient heat-up and cool-down cycle durations are measured as 40 ms and 20 ms, respectively.

  2. Microfabrication in free-standing gallium nitride using UV laser micromachining

    International Nuclear Information System (INIS)

    Gu, E.; Howard, H.; Conneely, A.; O'Connor, G.M.; Illy, E.K.; Knowles, M.R.H.; Edwards, P.R.; Martin, R.W.; Watson, I.M.; Dawson, M.D.

    2006-01-01

    Gallium nitride (GaN) and related alloys are important semiconductor materials for fabricating novel photonic devices such as ultraviolet (UV) light-emitting diodes (LEDs) and vertical cavity surface-emitting lasers (VCSELs). Recent technical advances have made free-standing GaN substrates available and affordable. However, these materials are strongly resistant to wet chemical etching and also, low etch rates restrict the use of dry etching. Thus, to develop alternative high-resolution processing for these materials is increasingly important. In this paper, we report the fabrication of microstructures in free-standing GaN using pulsed UV lasers. An effective method was first developed to remove the re-deposited materials due to the laser machining. In order to achieve controllable machining and high resolution in GaN, machining parameters were carefully optimised. Under the optimised conditions, precision features such as holes (through holes, blind or tapered holes) on a tens of micrometer length scale have been machined. To fabricate micro-trenches in GaN with vertical sidewalls and a flat bottom, different process strategies of laser machining were tested and optimised. Using this technique, we have successfully fabricated high-quality micro-trenches in free-standing GaN with various widths and depths. The approach combining UV laser micromachining and other processes is also discussed. Our results demonstrate that the pulsed UV laser is a powerful tool for fabricating precision microstructures and devices in gallium nitride

  3. Planar Indium Tin Oxide Heater for Improved Thermal Distribution for Metal Oxide Micromachined Gas Sensors

    Directory of Open Access Journals (Sweden)

    M. Cihan Çakır

    2016-09-01

    Full Text Available Metal oxide gas sensors with integrated micro-hotplate structures are widely used in the industry and they are still being investigated and developed. Metal oxide gas sensors have the advantage of being sensitive to a wide range of organic and inorganic volatile compounds, although they lack selectivity. To introduce selectivity, the operating temperature of a single sensor is swept, and the measurements are fed to a discriminating algorithm. The efficiency of those data processing methods strongly depends on temperature uniformity across the active area of the sensor. To achieve this, hot plate structures with complex resistor geometries have been designed and additional heat-spreading structures have been introduced. In this work we designed and fabricated a metal oxide gas sensor integrated with a simple square planar indium tin oxide (ITO heating element, by using conventional micromachining and thin-film deposition techniques. Power consumption–dependent surface temperature measurements were performed. A 420 °C working temperature was achieved at 120 mW power consumption. Temperature distribution uniformity was measured and a 17 °C difference between the hottest and the coldest points of the sensor at an operating temperature of 290 °C was achieved. Transient heat-up and cool-down cycle durations are measured as 40 ms and 20 ms, respectively.

  4. An overview of technologies for immobilization of enzymes and surface analysis techniques for immobilized enzymes

    Science.gov (United States)

    Mohamad, Nur Royhaila; Marzuki, Nur Haziqah Che; Buang, Nor Aziah; Huyop, Fahrul; Wahab, Roswanira Abdul

    2015-01-01

    The current demands of sustainable green methodologies have increased the use of enzymatic technology in industrial processes. Employment of enzyme as biocatalysts offers the benefits of mild reaction conditions, biodegradability and catalytic efficiency. The harsh conditions of industrial processes, however, increase propensity of enzyme destabilization, shortening their industrial lifespan. Consequently, the technology of enzyme immobilization provides an effective means to circumvent these concerns by enhancing enzyme catalytic properties and also simplify downstream processing and improve operational stability. There are several techniques used to immobilize the enzymes onto supports which range from reversible physical adsorption and ionic linkages, to the irreversible stable covalent bonds. Such techniques produce immobilized enzymes of varying stability due to changes in the surface microenvironment and degree of multipoint attachment. Hence, it is mandatory to obtain information about the structure of the enzyme protein following interaction with the support surface as well as interactions of the enzymes with other proteins. Characterization technologies at the nanoscale level to study enzymes immobilized on surfaces are crucial to obtain valuable qualitative and quantitative information, including morphological visualization of the immobilized enzymes. These technologies are pertinent to assess efficacy of an immobilization technique and development of future enzyme immobilization strategies. PMID:26019635

  5. Capability assessment and challenges for quantum technology gravity sensors for near surface terrestrial geophysical surveying

    Science.gov (United States)

    Boddice, Daniel; Metje, Nicole; Tuckwell, George

    2017-11-01

    Geophysical surveying is widely used for the location of subsurface features. Current technology is limited in terms of its resolution (thus size of features it can detect) and penetration depth and a suitable technique is needed to bridge the gap between shallow near surface investigation using techniques such as EM conductivity mapping and GPR commonly used to map the upper 5 m below ground surface, and large features at greater depths detectable using conventional microgravity (> 5 m below ground surface). This will minimise the risks from unknown features buried in and conditions of the ground during civil engineering work. Quantum technology (QT) gravity sensors potentially offer a step-change in technology for locating features which lie outside of the currently detectable range in terms of size and depth, but that potential is currently unknown as field instruments have not been developed. To overcome this, a novel computer simulation was developed for a large range of different targets of interest. The simulation included realistic noise modelling of instrumental, environmental and location sources of noise which limit the accuracy of current microgravity measurements, in order to assess the potential capability of the new QT instruments in realistic situations and determine some of the likely limitations on their implementation. The results of the simulations for near surface features showed that the new technology is best employed in a gradiometer configuration as opposed to the traditional single sensor gravimeter used by current instruments due to the ability to suppress vibrational environmental noise effects due to common mode rejection between the sensors. A significant improvement in detection capability of 1.5-2 times was observed, putting targets such as mineshafts into the detectability zone which would be a major advantage for subsurface surveying. Thus this research, for the first time, has demonstrated clearly the benefits of QT gravity

  6. Design of measurement system of 3D surface profile based on chromatic confocal technology

    Science.gov (United States)

    Wang, An-su; Xie, Bin; Liu, Zi-wei

    2018-01-01

    Chromatic confocal 3D profilometer has widely used in science investigation and industry fields recently for its high precision, great measuring range and numerical surface characteristic. It can provide exact and omnidirectional solution for manufacture and research by 3D non-contact surface analysis technique. The article analyzes the principle of surface measurement with chromatic confocal technology, and provides the designing indicators and requirements of the confocal system. As the key component, the dispersive objective used to achieve longitudinal focus vibration with wavelength was designed. The objective disperses the focus of wavelength between 400 700 nm to 15 mm longitudinal range. With selected spectrometer, the resolution of chromatic confocal 3D profilometer is no more than 5 μm, which can meet needs for the high precision non-contact surface profile measurement.

  7. A high-reflective surface measurement method based on conoscopic holography technology

    Science.gov (United States)

    Cheng, Xu; Li, ZhongWei; Shi, YuSheng; Zhao, HengShuang; Zhan, Guomin

    2014-11-01

    Measuring high-reflective surfaces using optical method is always a big challenging problem. This paper presents a high-reflective surface measurement method based on conoscopic holography technology using a 4D motion platform equipped with a conoscopic holography optical probe. There are two key problems needed to solve before the automate scan of the complex shape surface: the coordinate calibration and the path planning. To improve the calibration efficiency and accuracy, the coordinate calibration is divided into two parts: the rough calibration and the accurate registration. The path planning consists of two aspects including: the path points generation and the path points verification. In addition, by scanning the objects having high-reflective surfaces, such as the metal blades, coins and other work-pieces, the efficiency of the measurement method has been verified.

  8. Surface electromagnetic technology for the external inspection of oil and gas pipelines

    Energy Technology Data Exchange (ETDEWEB)

    Mousatov, A.; Nakamura, E.; Delgado, O.; Flores, A. [Mexican Petroleum Institute, Mexico City (Mexico); Nakamura, E. [Moscow State University, Moscow (Russian Federation); Shevnin, V. [Moscow State University (Russian Federation)

    2009-07-01

    In this paper we present a surface electromagnetic technology for the non-destructive pipeline coating inspection (SEMPI). This technology allows: determination of the depth and plane position of pipelines, quantitative evaluation of the insulation resistance and delimitation of zones with coating damages, estimation of the performance of the cathodic protection system (CPS) and detection of its connections to out-of-service pipes and other grounded constructions, and assessment of the soil aggressively. The SEMPI technology is based on the approximation of pipelines by heterogeneous transmission lines with variable leakage conductance and pipe impedance to represent insulation coating and wall thickness damages. Based on the result of simulations, we have optimized the field measurements and developed the interpretation procedure of experimental data. The field operations include surface measurements of magnetic field, voltage on the control posts of the CPS and soil resistivity. In zones with coating damages the detailed measurements can be performed using magnetic or electric field to increase the resolution in localizing and evaluating the insulation damages. The SEMPI technology has been applied for inspections of pipelines with different technical characteristics in complicated environmental conditions. The examples presented in this work confirm the high efficiency of the developed technology for external integrity evaluation of pipelines. (author)

  9. Surface biofunctionalization and production of miniaturized sensor structures using aerosol printing technologies

    International Nuclear Information System (INIS)

    Grunwald, Ingo; Groth, Esther; Wirth, Ingo; Schumacher, Julian; Maiwald, Marcus; Zoellmer, Volker; Busse, Matthias

    2010-01-01

    The work described in this paper demonstrates that very small protein and DNA structures can be applied to various substrates without denaturation using aerosol printing technology. This technology allows high-resolution deposition of various nanoscaled metal and biological suspensions. Before printing, metal and biological suspensions were formulated and then nebulized to form an aerosol which is aerodynamically focused on the printing module of the system in order to achieve precise structuring of the nanoscale material on a substrate. In this way, it is possible to focus the aerosol stream at a distance of about 5 mm from the printhead to the surface. This technology is useful for printing fluorescence-marked proteins and printing enzymes without affecting their biological activity. Furthermore, higher molecular weight DNA can be printed without shearing. The advantages, such as printing on complex, non-planar 3D structured surfaces, and disadvantages of the aerosol printing technology are also discussed and are compared with other printing technologies. In addition, miniaturized sensor structures with line thicknesses in the range of a few micrometers are fabricated by applying a silver sensor structure to glass. After sintering using an integrated laser or in an oven process, electrical conductivity is achieved within the sensor structure. Finally, we printed BSA in small micrometre-sized areas within the sensor structure using the same deposition system. The aerosol printing technology combined with material development offers great advantages for future-oriented applications involving biological surface functionalization on small areas. This is important for innovative biomedical micro-device development and for production solutions which bridge the disciplines of biology and electronics.

  10. Manufacturing technology: A Sandia Technology Bulletin, Volume 1, No. 1

    Energy Technology Data Exchange (ETDEWEB)

    Maydew, R.C.; Leonard, J.A.; Hey, N.S. (eds.)

    1990-08-01

    Welcome to this first issue of Manufacturing Technology, one of three new technology bulletins published at Sandia National Laboratories in which we seek to share information with US industry about applications of technology. Inside this issue: industry/DOE/Sandia agreement to strengthen specialty metals competitiveness; silicon micromachining produces microscopic parts; Sandia develops state-of-the-art capacitor winding machine; new robotic system spells finis to manual edge finishing; and milling assistant speeds numerically controlled machine programming.

  11. Giant flexoelectric polarization in a micromachined ferroelectric diaphragm

    KAUST Repository

    Wang, Zhihong

    2012-08-14

    The coupling between dielectric polarization and strain gradient, known as flexoelectricity, becomes significantly large on the micro- and nanoscale. Here, it is shown that giant flexoelectric polarization can reverse remnant ferroelectric polarization in a bent Pb(Zr0.52Ti0.48) O3 (PZT) diaphragm fabricated by micromachining. The polarization induced by the strain gradient and the switching behaviors of the polarization in response to an external electric field are investigated by observing the electromechanical coupling of the diaphragm. The method allows determination of the absolute zero polarization state in a PZT film, which is impossible using other existing methods. Based on the observation of the absolute zero polarization state and the assumption that bending of the diaphragm is the only source of the self-polarization, the upper bound of flexoelectric coefficient of PZT film is calculated to be as large as 2.0 × 10-4 C m -1. The strain gradient induced by bending the diaphragm is measured to be on the order of 102 m-1, three orders of magnitude larger than that obtained in the bulk material. Because of this large strain gradient, the estimated giant flexoelectric polarization in the bent diaphragm is on the same order of magnitude as the normal remnant ferroelectric polarization of PZT film. Copyright © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

  12. Review of piezoelectric micromachined ultrasonic transducers and their applications

    Science.gov (United States)

    Jung, Joontaek; Lee, Wonjun; Kang, Woojin; Shin, Eunjung; Ryu, Jungho; Choi, Hongsoo

    2017-11-01

    In recent decades, micromachined ultrasonic transducers (MUTs) have been investigated as an alternative to conventional piezocomposite ultrasonic transducers, primarily due to the advantages that microelectromechanical systems provide. Miniaturized ultrasonic systems require ultrasonic transducers integrated with complementary metal-oxide-semiconductor circuits. Hence, piezoelectric MUTs (pMUTs) and capacitive MUTs (cMUTs) have been developed as the most favorable solutions. This paper reviews the basic equations to understand the characteristics of thin-film-based piezoelectric devices and presents recent research on pMUTs, including current approaches and limitations. Methods to improve the coupling coefficient of pMUTs are also investigated, such as device structure, materials, and fabrication techniques. The device structure improvements include multielectrode pMUTs, partially clamped boundary conditions, and 3D pMUTs (curved and domed types), where the latter can provide an electromechanical coupling coefficient of up to 45%. The piezoelectric coefficient (e 31) can be increased by controlling the crystal texture (seed layer of γ-Al2O3), using single-crystal (PMN-PT) materials, or control of residual stresses (using SiO2 layer). Arrays of pMUTs can be implemented for various applications including intravascular ultrasound, fingerprint sensors, rangefinders in air, and wireless power supply systems. pMUTs are expected to be an ideal solution for applications such as mobile biometric security (fingerprint sensors) and rangefinders due to their superior power efficiency and compact size.

  13. Development of capacitive micromachined ultrasonic transducer for noncontact ultrasonic detection

    Energy Technology Data Exchange (ETDEWEB)

    Kim, Ki Bok; Ahn, Bong Young; Park, Hae Won; Kim, Young Joo; Lee, Seung Seok [Center for Environment and Safrty Measurement, KRISS, Daejeon (Korea, Republic of)

    2004-11-15

    In this study, the capacitive micromachined ultrasonic transducer (cMUT) was developed. Theoretical analysis and finite element analysis of the behavior of membrane (such as resonance frequency, membrane deflection, collapse deflection and collapse voltage) of the cMUT were performed. The design parameters of the cMUT were estimated and are the dimension and thickness of membrane, thickness of sacrificial layer, thickness and size of electrode, size of active element and so on. With the micro-fabrication process, the cMUT was fabricated on the silicon wafer. To measure the membrane displacement of cMUT, the Michelson phase modulation fiber interferometer was constructed. The measured membrane displacement was good agreed with the result of finite element analysis. To estimate the ultrasonic wave generated by the cMUT, the ultrasonic transceiver system was constructed. The developed cMUT shows a good performance and hence will be widely used to the filed of non-contact ultrasonic application.

  14. Capacitive micromachined ultrasound transducer (cMUT) for immunosensor design.

    Science.gov (United States)

    Ramanaviciene, Almira; Virzonis, Darius; Vanagas, Gailius; Ramanavicius, Arūnas

    2010-07-01

    An affinity sensor based on a capacitive micromachined ultrasound transducer (cMUT) is reported by this Communication. The cMUT micromembrane arrays modified with adsorbed bovine leukemia virus protein gp51 were applied as a biological recognition part. The cMUT-based sensor is shown to be sensitive to the antibodies against bovine leukemia virus protein gp51 (anti-gp51). Two different concentrations of anti-gp51-containing samples and one blank sample without anti-gp51 were tested. The sensitivity of cMUT-based immunosensor is comparable with the sensitivity of a quartz microbalance-based immunosensor. The cMUT array provides a multi-channel system for the measurement of analytical signal. Moreover, two different characteristics--the resonance frequency shift (Deltaf) and the shift of the real part of the electromechanical impedance (DeltaRe)--could have been evaluated simultaneously. Both analytical signals are informative and can be applied for the estimation of immune complex formation. We found the performance of such a system being potentially superior over some other immunosensing techniques. It is more rapid than electrochemical techniques and provides two different informative parameters.

  15. Singulation for imaging ring arrays of capacitive micromachined ultrasonic transducers

    International Nuclear Information System (INIS)

    Chang, Chienliu; Moini, Azadeh; Nikoozadeh, Amin; Sarioglu, Ali Fatih; Apte, Nikhil; Zhuang, Xuefeng; Khuri-Yakub, Butrus T

    2014-01-01

    Singulation of MEMS is a critical step in the transition from wafer-level to die-level devices. As is the case for capacitive micromachined ultrasound transducer (CMUT) ring arrays, an ideal singulation must protect the fragile membranes from the processing environment while maintaining a ring array geometry. The singulation process presented in this paper involves bonding a trench-patterned CMUT wafer onto a support wafer, deep reactive ion etching (DRIE) of the trenches, separating the CMUT wafer from the support wafer and de-tethering the CMUT device from the CMUT wafer. The CMUT arrays fabricated and singulated in this process were ring-shaped arrays, with inner and outer diameters of 5 mm and 10 mm, respectively. The fabricated CMUT ring arrays demonstrate the ability of this method to successfully and safely singulate the ring arrays and is applicable to any arbitrary 2D shaped MEMS device with uspended microstructures, taking advantage of the inherent planar attributes of DRIE. (technical note)

  16. Radiation impedance of collapsed capacitive micromachined ultrasonic transducers.

    Science.gov (United States)

    Ozgurluk, Alper; Atalar, Abdullah; Köymen, Hayrettin; Olçum, Selim

    2012-06-01

    The radiation impedance of a capacitive micromachined ultrasonic transducer (CMUT) array is a critical parameter to achieve high performance. In this paper, we present a calculation of the radiation impedance of collapsed, clamped, circular CMUTs both analytically and using finite element method (FEM) simulations. First, we model the radiation impedance of a single collapsed CMUT cell analytically by expressing its velocity profile as a linear combination of special functions for which the generated pressures are known. For an array of collapsed CMUT cells, the mutual impedance between the cells is also taken into account. The radiation impedances for arrays of 7, 19, 37, and 61 circular collapsed CMUT cells for different contact radii are calculated both analytically and by FEM simulations. The radiation resistance of an array reaches a plateau and maintains this level for a wide frequency range. The variation of radiation reactance with respect to frequency indicates an inductance-like behavior in the same frequency range. We find that the peak radiation resistance value is reached at higher kd values in the collapsed case as compared with the uncollapsed case, where k is the wavenumber and d is the center-to-center distance between two neighboring CMUT cells.

  17. Development of capacitive micromachined ultrasonic transducer for noncontact ultrasonic detection

    International Nuclear Information System (INIS)

    Kim, Ki Bok; Ahn, Bong Young; Park, Hae Won; Kim, Young Joo; Lee, Seung Seok

    2004-01-01

    In this study, the capacitive micromachined ultrasonic transducer (cMUT) was developed. Theoretical analysis and finite element analysis of the behavior of membrane (such as resonance frequency, membrane deflection, collapse deflection and collapse voltage) of the cMUT were performed. The design parameters of the cMUT were estimated and are the dimension and thickness of membrane, thickness of sacrificial layer, thickness and size of electrode, size of active element and so on. With the micro-fabrication process, the cMUT was fabricated on the silicon wafer. To measure the membrane displacement of cMUT, the Michelson phase modulation fiber interferometer was constructed. The measured membrane displacement was good agreed with the result of finite element analysis. To estimate the ultrasonic wave generated by the cMUT, the ultrasonic transceiver system was constructed. The developed cMUT shows a good performance and hence will be widely used to the filed of non-contact ultrasonic application.

  18. Receive-Noise Analysis of Capacitive Micromachined Ultrasonic Transducers.

    Science.gov (United States)

    Bozkurt, Ayhan; Yaralioglu, G Goksenin

    2016-11-01

    This paper presents an analysis of thermal (Johnson) noise received from the radiation medium by otherwise noiseless capacitive micromachined ultrasonic transducer (CMUT) membranes operating in their fundamental resonance mode. Determination of thermal noise received by multiple numbers of transducers or a transducer array requires the assessment of cross-coupling through the radiation medium, as well as the self-radiation impedance of the individual transducer. We show that the total thermal noise received by the cells of a CMUT has insignificant correlation, and is independent of the radiation impedance, but is only determined by the mass of each membrane and the electromechanical transformer ratio. The proof is based on the analytical derivations for a simple transducer with two cells, and extended to transducers with numerous cells using circuit simulators. We used a first-order model, which incorporates the fundamental resonance of the CMUT. Noise power is calculated by integrating over the entire spectrum; hence, the presented figures are an upper bound for the noise. The presented analyses are valid for a transimpedance amplifier in the receive path. We use the analysis results to calculate the minimum detectable pressure of a CMUT. We also provide an analysis based on the experimental data to show that output noise power is limited by and comparable to the theoretical upper limit.

  19. Encapsulation of Capacitive Micromachined Ultrasonic Transducers Using Viscoelastic Polymer

    Science.gov (United States)

    Lin, Der-Song; Zhuang, Xuefeng; Wong, Serena H.; Kupnik, Mario; Khuri-Yakub, Butrus Thomas

    2010-01-01

    The packaging of a medical imaging or therapeutic ultrasound transducer should provide protective insulation while maintaining high performance. For a capacitive micromachined ultrasonic transducer (CMUT), an ideal encapsulation coating would therefore require a limited and predictable change on the static operation point and the dynamic performance, while insulating the high dc and dc actuation voltages from the environment. To fulfill these requirements, viscoelastic materials, such as polydimethylsiloxane (PDMS), were investigated for an encapsulation material. In addition, PDMS, with a glass-transition temperature below room temperature, provides a low Young's modulus that preserves the static behavior; at higher frequencies for ultrasonic operation, this material becomes stiffer and acoustically matches to water. In this paper, we demonstrate the modeling and implementation of the viscoelastic polymer as the encapsulation material. We introduce a finite element model (FEM) that addresses viscoelasticity. This enables us to correctly calculate both the static operation point and the dynamic behavior of the CMUT. CMUTs designed for medical imaging and therapeutic ultrasound were fabricated and encapsulated. Static and dynamic measurements were used to verify the FEM and show excellent agreement. This paper will help in the design process for optimizing the static and the dynamic behavior of viscoelastic-polymer-coated CMUTs. PMID:21170294

  20. Singulation for imaging ring arrays of capacitive micromachined ultrasonic transducers

    Science.gov (United States)

    Chang, Chienliu; Moini, Azadeh; Nikoozadeh, Amin; Sarioglu, Ali Fatih; Apte, Nikhil; Zhuang, Xuefeng; Khuri-Yakub, Butrus T.

    2014-10-01

    Singulation of MEMS is a critical step in the transition from wafer-level to die-level devices. As is the case for capacitive micromachined ultrasound transducer (CMUT) ring arrays, an ideal singulation must protect the fragile membranes from the processing environment while maintaining a ring array geometry. The singulation process presented in this paper involves bonding a trench-patterned CMUT wafer onto a support wafer, deep reactive ion etching (DRIE) of the trenches, separating the CMUT wafer from the support wafer and de-tethering the CMUT device from the CMUT wafer. The CMUT arrays fabricated and singulated in this process were ring-shaped arrays, with inner and outer diameters of 5 mm and 10 mm, respectively. The fabricated CMUT ring arrays demonstrate the ability of this method to successfully and safely singulate the ring arrays and is applicable to any arbitrary 2D shaped MEMS device with uspended microstructures, taking advantage of the inherent planar attributes of DRIE.

  1. Towards a Casimir Force Measurement between Micromachined Parallel Plate Structures

    Directory of Open Access Journals (Sweden)

    Remco J. Wiegerink

    2012-11-01

    Full Text Available Ever since its prediction, experimental investigation of the Casimir force has been of great scientific interest. Many research groups have successfully attempted quantifying the force with different device geometries; however, measurement of the Casimir force between parallel plates with sub-micron separation distance is still a challenging task, since it becomes extremely difficult to maintain sufficient parallelism between the plates. The Casimir force can significantly influence the operation of micro devices and to realize reliable and reproducible devices it is necessary to understand and experimentally verify the influence of the Casimir force at sub-micron scale. In this paper, we present the design principle, fabrication and characterization of micromachined parallel plate structures that could allow the measurement of the Casimir force with tunable separation distance in the range of 100 to 1000 nm. Initially, a gold coated parallel plate structure is explored to measure the Casimir force, but also other material combinations could be investigated. Using gold-silicon eutectic bonding, a reliable approach to bond chips with integrated suspended plates together with a well-defined separation distance in the order of 1–2 μm is developed.

  2. A Micromachined Infrared Senor for an Infrared Focal Plane Array

    Directory of Open Access Journals (Sweden)

    Seong M. Cho

    2008-04-01

    Full Text Available A micromachined infrared sensor for an infrared focal plane array has been designed and fabricated. Amorphous silicon was used as a sensing material, and silicon nitride was used as a membrane material. To get a good absorption in infrared range, the sensor structure was designed as a l/4 cavity structure. A Ni-Cr film was selected as an electrode material and mixed etching scheme was applied in the patterning process of the Ni-Cr electrode. All the processes were made in 0.5 μm iMEMS fabricated in the Electronics and Telecommunication Research Institute (ETRI. The processed MEMS sensor had a small membrane deflection less than 0.15 μm. This small deflection can be attributed to the rigorous balancing of the stresses of individual layers. The efficiency of infrared absorption was more than 75% in the wavelength range of 8 ~ 14 μm. The processed infrared sensor showed high responsivity of ~230 kV/W at 1.0V bias and 2 Hz operation condition. The time constant of the sensor was 8.6 msec, which means that the sensor is suitable to be operated in 30 Hz frame rate.

  3. Review of piezoelectric micromachined ultrasonic transducers and their applications

    International Nuclear Information System (INIS)

    Jung, Joontaek; Lee, Wonjun; Kang, Woojin; Shin, Eunjung; Choi, Hongsoo; Ryu, Jungho

    2017-01-01

    In recent decades, micromachined ultrasonic transducers (MUTs) have been investigated as an alternative to conventional piezocomposite ultrasonic transducers, primarily due to the advantages that microelectromechanical systems provide. Miniaturized ultrasonic systems require ultrasonic transducers integrated with complementary metal-oxide-semiconductor circuits. Hence, piezoelectric MUTs (pMUTs) and capacitive MUTs (cMUTs) have been developed as the most favorable solutions. This paper reviews the basic equations to understand the characteristics of thin-film-based piezoelectric devices and presents recent research on pMUTs, including current approaches and limitations. Methods to improve the coupling coefficient of pMUTs are also investigated, such as device structure, materials, and fabrication techniques. The device structure improvements include multielectrode pMUTs, partially clamped boundary conditions, and 3D pMUTs (curved and domed types), where the latter can provide an electromechanical coupling coefficient of up to 45%. The piezoelectric coefficient ( e 31 ) can be increased by controlling the crystal texture (seed layer of γ -Al 2 O 3 ), using single-crystal (PMN-PT) materials, or control of residual stresses (using SiO 2 layer). Arrays of pMUTs can be implemented for various applications including intravascular ultrasound, fingerprint sensors, rangefinders in air, and wireless power supply systems. pMUTs are expected to be an ideal solution for applications such as mobile biometric security (fingerprint sensors) and rangefinders due to their superior power efficiency and compact size. (topical review)

  4. Design and Simulation of a New Decoupled Micromachined Gyroscope

    Energy Technology Data Exchange (ETDEWEB)

    Sharaf, Abdelhameed [NCRRT, EAEA, 3 Ahmed Elzomer Street, Nasr City, Cairo (Egypt); STRC, AUC, 113 Kasr El Eini Street, 11215, Cairo (Egypt); Sedky, Sherif [STRC, AUC, 113 Kasr El Eini Street, 11215, Cairo (Egypt); Physics Department, AUC, 113 Kasr El Eini Street, 11215, Cairo (Egypt); Habib, S E-D [Electronics and Communication Department, Faculty of Engineering, Cairo University, 12613, Giza (Egypt)

    2006-04-01

    This paper reports on a new decoupled micromachined gyroscope. The proposed sensor is a dual mass type, electrostatically driven to primary mode oscillation and senses, capacitively, the output signal. Full decoupling between drive and sense modes minimizes the mechanical crosstalk. Three different designs are introduced in this work. Drive and sense amplitudes, mechanical and electrical sensitivities, quality factors and approximate bandwidths are extracted analytically and the results are confirmed using finite element analysis. The first design shows drive and sense modes resonance frequencies of 4077 Hz and 4081 Hz respectively; with a frequency mismatch lower than 0.1%. The drive and sense capacitance are 0.213 pF and 0.142 pF respectively. The mechanical and electrical sensitivities are 0.011 {mu}m/ ({sup 0}/s) and 2.75 mV/ ({sup 0}/s) respectively. The third design shows significantly improved mechanical and electrical sensitivities of 0.027 {mu}m/ ({sup 0}/s) and 6.85 mV/ ({sup 0}/s) respectively.

  5. A Novel RFID Sensing System Using Enhanced Surface Wave Technology for Battery Exchange Stations

    Directory of Open Access Journals (Sweden)

    Yeong-Lin Lai

    2014-01-01

    Full Text Available This paper presents a novel radio-frequency identification (RFID sensing system using enhanced surface wave technology for battery exchange stations (BESs of electric motorcycles. Ultrahigh-frequency (UHF RFID technology is utilized to automatically track and manage battery and user information without manual operation. The system includes readers, enhanced surface wave leaky cable antennas (ESWLCAs, coupling cable lines (CCLs, and small radiation patches (SRPs. The RFID sensing system overcomes the electromagnetic interference in the metallic environment of a BES cabinet. The developed RFID sensing system can effectively increase the efficiency of BES operation and promote the development of electric vehicles which solve the problem of air pollution as well as protect the environment of the Earth.

  6. Technological Aspects of Corrosion-Resistant Steels Surfacing by Intense Relativistic Electron Beams

    Science.gov (United States)

    Belozerov, V. V.; Donets, S. E.; Klepikov, V. F.; Kivshik, V. F.; Lytvynenko, V. V.; Lonin, Yu. F.; Ponomarev, A. G.; Uvarov, V. T.

    Intense tubular relativistic electron beams are a promising tool for a number of practical applications, such as obtaining nanodispersed powder materials, surface properties modification of products, remote surfacing, etc. In current technologies for obtaining of nanopowder materials, one of the leading techniques is one based on the materials handling concentrated flows of energy. Using the various technological equipment (pulse current generators, accelerators), energy is inputted into the material in the form of intense impulse current, the plasma flows of charged particle beams. Each of the specified types of impact is characterized by a certain decomposition mechanism of processed materials to micro- and nano-sized state. Thus, the action of intense pulsed currents based on the thermal evaporation of a melt conductor with its subsequent condensation in liquid, the use of plasma flows and charged particle beams also involves evaporation and condensation of a material in a vacuum or in a special atmosphere.

  7. Process optimization of rolling for zincked sheet technology using response surface methodology and genetic algorithm

    Science.gov (United States)

    Ji, Liang-Bo; Chen, Fang

    2017-07-01

    Numerical simulation and intelligent optimization technology were adopted for rolling and extrusion of zincked sheet. By response surface methodology (RSM), genetic algorithm (GA) and data processing technology, an efficient optimization of process parameters for rolling of zincked sheet was investigated. The influence trend of roller gap, rolling speed and friction factor effects on reduction rate and plate shortening rate were analyzed firstly. Then a predictive response surface model for comprehensive quality index of part was created using RSM. Simulated and predicted values were compared. Through genetic algorithm method, the optimal process parameters for the forming of rolling were solved. They were verified and the optimum process parameters of rolling were obtained. It is feasible and effective.

  8. Position-sensitive radiation monitoring (surface contamination monitor). Innovative technology summary report

    International Nuclear Information System (INIS)

    1999-06-01

    The Shonka Research Associates, Inc. Position-Sensitive Radiation Monitor both detects surface radiation and prepares electronic survey map/survey report of surveyed area automatically. The electronically recorded map can be downloaded to a personal computer for review and a map/report can be generated for inclusion in work packages. Switching from beta-gamma detection to alpha detection is relatively simple and entails moving a switch position to alpha and adjusting the voltage level to an alpha detection level. No field calibration is required when switching from beta-gamma to alpha detection. The system can be used for free-release surveys because it meets the federal detection level sensitivity limits requires for surface survey instrumentation. This technology is superior to traditionally-used floor contamination monitor (FCM) and hand-held survey instrumentation because it can precisely register locations of radioactivity and accurately correlate contamination levels to specific locations. Additionally, it can collect and store continuous radiological data in database format, which can be used to produce real-time imagery as well as automated graphics of survey data. Its flexible design can accommodate a variety of detectors. The cost of the innovative technology is 13% to 57% lower than traditional methods. This technology is suited for radiological surveys of flat surfaces at US Department of Energy (DOE) nuclear facility decontamination and decommissioning (D and D) sites or similar public or commercial sites

  9. An Integrated Surface Engineering Technology Development for Improving Energy Efficiency of Engine Components

    Energy Technology Data Exchange (ETDEWEB)

    Stephen Hsu; Liming Chang; Huan Zhan

    2009-05-31

    Frictional losses are inherent in most practical mechanical systems. The ability to control friction offers many opportunities to achieve energy conservation. Over the years, materials, lubricants, and surface modifications have been used to reduce friction in automotive and diesel engines. However, in recent years, progress in friction reduction technology has slowed because many of the inefficiencies have been eliminated. A new avenue for friction reduction is needed. Designing surfaces specifically for friction reduction with concomitant enhanced durability for various engine components has emerged recently as a viable opportunity due to advances in fabrication and surface finishing techniques. Recently, laser ablated dimples on surfaces have shown friction reduction properties and have been demonstrated successfully in conformal contacts such as seals where the speed is high and the load is low. The friction reduction mechanism in this regime appears to depend on the size, patterns, and density of dimples in the contact. This report describes modeling efforts in characterizing surface textures and understanding their mechanisms for enhanced lubrication under high contact pressure conditions. A literature survey is first presented on the development of descriptors for irregular surface features. This is followed by a study of the hydrodynamic effects of individual micro-wedge dimples using the analytical solution of the 1-D Reynolds equation and the determination of individual components of the total friction resistance. The results obtained provide a better understanding of the dimple orientation effects and the approach which may be used to further compare the friction reduction provided by different texture patterns.

  10. Quality investigation of surface mount technology using phase-shifting digital holography

    Science.gov (United States)

    Boonsri, Chantira; Buranasiri, Prathan

    2016-09-01

    Applying of a phase-shifting digital holography combined with compressive sensing to inspect the soldering quality of surface mount technology (SMT) which is a method for producing electronic circuits. In SMT, the components are mounted and connected with each other directly onto the surface of printed circuit boards (PCBs). By reconstructing the multidimensional images from a few samples of SMT, the results are solved by an optimization problem. In this paper, two problems have been concerned. The first one is to examine the devices and the soldering quality of connections between them, which are in micro-scaled. The second is to observe the effect of heat treatment of soldering material and devices on the surface mount board.

  11. Development of New Materials and Technologies for Welding and Surfacing at Research and Production Center 'Welding Processes and Technologies'

    International Nuclear Information System (INIS)

    Kozyrev, N A; Kryukov, R E; Galevsky, G V; Titov, D A; Shurupov, V M

    2015-01-01

    The paper provides description of research into the influence of new materials and technologies on quality parameters of welds and added metal carried out at research and production center «Welding processes and technologies».New welding technologies of tanks for northern conditions are considered, as well as technologies of submerged arc welding involving fluxing agents AN - 348, AN - 60, AN - 67, OK. 10.71 and carbon-fluorine containing additives, new flux cored wires and surfacing technologies, teaching programs and a trainer for welders are designed. (paper)

  12. Micromachined Millimeter- and Submillimeter-Wave SIS Heterodyne Receivers for Remote Sensing

    Science.gov (United States)

    Hu, Qing

    1998-01-01

    A heterodyne mixer with a micromachined horn antenna and a superconductor -insulator-superconductor (SIS) tunnel junction as mixing element is tested in the W-band (75-115 GHz) frequency range. Micromachined integrated horn antennas consist of a dipole antenna suspended on a thin Si3N4 dielectric membrane inside a pyramidal cavity etched in silicon. The mixer performance is optimized by using a backing plane behind the dipole antenna to tune out the capacitance of the tunnel junction. The lowest receiver noise temperature of 30+/-3 K without any correction) is measured at 106 GHz with a 3-dB bandwidth of 8 GHz. This sensitivity is comparable to the state-of-the-art waveguide and quasi-optical SIS receivers, showing the potential use of micromachined horn antennas in imaging arrays.

  13. A Low-noise Micromachined Millimeter-Wave Heterodyne Mixer using Nb Superconducting Tunnel Junctions

    Science.gov (United States)

    DeLange, Gert; Jacobson, Brian R.; Hu, Qing

    1996-01-01

    A heterodyne mixer with a micromachined horn antenna and a superconductor-insulator-superconductor (SIS) tunnel junction as mixing element is tested in the W-band (75-115 GHz) frequency range. Micromachined integrated horn antennas consist of a dipole antenna suspended on a thin Si3N4 dielectric membrane inside a pyramidal cavity etched in silicon. The mixer performance is optimized by using a backing plane behind the dipole antenna to tune out the capacitance of the tunnel junction. The lowest receiver noise temperature of 30 +/- 3 K (without any correction) is measured at 106 GHz with a 3-dB bandwidth of 8 GHz. This sensitivity is comparable to the state-of-the-art waveguide and quasi-optical SIS receivers, showing the potential use of micromachined horn antennas in imaging arrays.

  14. Technology and human purpose: the problem of solids transport on the Earth's surface

    Science.gov (United States)

    Haff, P. K.

    2012-11-01

    Displacement of mass of limited deformability ("solids") on the Earth's surface is opposed by friction and (the analog of) form resistance - impediments relaxed by rotational motion, self-powering of mass units, and transport infrastructure. These features of solids transport first evolved in the biosphere prior to the emergence of technology, allowing slope-independent, diffusion-like motion of discrete objects as massive as several tons, as illustrated by animal foraging and movement along game trails. However, high-energy-consumption technology powered by fossil fuels required a mechanism that could support fast advective transport of solids, i.e., long-distance, high-volume, high-speed, unidirectional, slope-independent transport across the land surface of materials like coal, containerized fluids, minerals, and economic goods. Pre-technology nature was able to sustain regional- and global-scale advection only in the limited form of piggybacking on geophysical flows of water (river sediment) and air (dust). The appearance of a mechanism for sustained advection of solids independent of fluid flows and gravity appeared only upon the emergence of human purpose. Purpose enables solids advection by, in effect, simulating a continuous potential gradient, otherwise lacking, between discrete and widely separated fossil-fuel energy sources and sinks. Invoking purpose as a mechanism in solids advection is an example of the need to import anthropic principles and concepts into the language and methodology of modern Earth system dynamics. As part of the emergence of a generalized solids advection mechanism, several additional transport requirements necessary to the function of modern large-scale technological systems were also satisfied. These include spatially accurate delivery of advected payload, targetability to essentially arbitrarily located destinations (such as cities), and independence of structure of advected payload from transport mechanism. The latter property

  15. Technology and human purpose: the problem of solids transport on the Earth's surface

    Directory of Open Access Journals (Sweden)

    P. K. Haff

    2012-11-01

    Full Text Available Displacement of mass of limited deformability ("solids" on the Earth's surface is opposed by friction and (the analog of form resistance – impediments relaxed by rotational motion, self-powering of mass units, and transport infrastructure. These features of solids transport first evolved in the biosphere prior to the emergence of technology, allowing slope-independent, diffusion-like motion of discrete objects as massive as several tons, as illustrated by animal foraging and movement along game trails. However, high-energy-consumption technology powered by fossil fuels required a mechanism that could support fast advective transport of solids, i.e., long-distance, high-volume, high-speed, unidirectional, slope-independent transport across the land surface of materials like coal, containerized fluids, minerals, and economic goods. Pre-technology nature was able to sustain regional- and global-scale advection only in the limited form of piggybacking on geophysical flows of water (river sediment and air (dust. The appearance of a mechanism for sustained advection of solids independent of fluid flows and gravity appeared only upon the emergence of human purpose. Purpose enables solids advection by, in effect, simulating a continuous potential gradient, otherwise lacking, between discrete and widely separated fossil-fuel energy sources and sinks. Invoking purpose as a mechanism in solids advection is an example of the need to import anthropic principles and concepts into the language and methodology of modern Earth system dynamics. As part of the emergence of a generalized solids advection mechanism, several additional transport requirements necessary to the function of modern large-scale technological systems were also satisfied. These include spatially accurate delivery of advected payload, targetability to essentially arbitrarily located destinations (such as cities, and independence of structure of advected payload from transport mechanism. The

  16. Acoustical imaging using capacitive micromachined ultrasonic transducer arrays: Devices, circuits, and systems

    Science.gov (United States)

    Oralkan, Omer

    Integrated circuit technologies have had a great impact on the development of medical devices. Diagnostic imaging systems have benefited tremendously from the improvements in integrated circuits. One of the recent examples of this interaction between the two disciplines occurred in the area of ultrasonic imaging. The ability to build structures with dimensions in the submicron range enabled the realization of an almost a century old idea: Capacitive ultrasonic transducers. The major advantages of this transducer technology are ease of fabrication, potential for integration with supporting electronic circuits and improved bandwidth and sensitivity. This dissertation analyzes the viability of capacitive micromachined ultrasonic transducers (CMUTs) for practical imaging applications. This analysis is conducted by a detailed characterization effort, and by demonstrating both 2-D and 3-D images. Acoustical performance of 1-D and 2-D CMUT arrays fabricated using silicon integrated circuit technology has been experimentally characterized for transmit and receive modes, and the results are found to be in good agreement with the theoretical expectations. Both 2-D and 3-D images have been demonstrated. The distinctive features of CMUTs manifest themselves in the results of the characterization experiments and also in the resulting images. This dissertation also describes a general approach to design integrated front-end circuits for ultrasonic imaging and demonstrates basic circuit blocks for use in integrated systems along with CMUT arrays. The integration of the ultrasonic transducer arrays with supporting electronics not only reduces the cost and complexity of the system but also provides several advantages such as reduced parasitics, improved sensitivity, and a compact design with a reduced number of external interconnects. In this study, a custom integrated circuit comprising a pulse driver, a transmit/receive (T/R) switch and a wideband preamplifier has been fabricated

  17. Experimental Analysis of Bisbenzocyclobutene Bonded Capacitive Micromachined Ultrasonic Transducers.

    Science.gov (United States)

    Manwar, Rayyan; Chowdhury, Sazzadur

    2016-06-24

    Experimental measurement results of a 1.75 mm × 1.75 mm footprint area Capacitive Micromachined Ultrasonic Transducer (CMUT) planar array fabricated using a bisbenzocyclobutene (BCB)-based adhesive wafer bonding technique has been presented. The array consists of 40 × 40 square diaphragm CMUT cells with a cavity thickness of 900 nm and supported by 10 µm wide dielectric spacers patterned on a thin layer of BCB. A 150 µm wide one µm thick gold strip has been used as the contact pad for gold wire bonding. The measured resonant frequency of 19.3 MHz using a Polytec™ laser Doppler vibrometer (Polytec™ MSA-500) is in excellent agreement with the 3-D FEA simulation result using IntelliSuite™. An Agilent ENA5061B vector network analyzer (VNA) has been used for impedance measurement and the resonance and anti-resonance values from the imaginary impedance curve were used to determine the electromechanical coupling co-efficient. The measured coupling coefficient of 0.294 at 20 V DC bias exhibits 40% higher transduction efficiency as compared to a measured value published elsewhere for a silicon nitride based CMUT. A white light interferometry method was used to measure the diaphragm deflection profiles at different DC bias. The diaphragm center velocity was measured for different sub-resonant frequencies using a Polytec™ laser Doppler vibrometer that confirms vibration of the diaphragm at different excitation frequencies and bias voltages. Transmit and receive operations of CMUT cells were characterized using a pitch-catch method and a -6 dB fractional bandwidth of 23% was extracted from the received signal in frequency domain. From the measurement, it appears that BCB-based CMUTs offer superior transduction efficiency as compared to silicon nitride or silicon dioxide insulator-based CMUTs, and provide a very uniform deflection profile thus making them a suitable candidate to fabricate highly energy efficient CMUTs.

  18. Chemical vapor detection using a capacitive micromachined ultrasonic transducer.

    Science.gov (United States)

    Lee, Hyunjoo J; Park, Kwan Kyu; Kupnik, Mario; Oralkan, O; Khuri-Yakub, Butrus T

    2011-12-15

    Distributed sensing of gas-phase chemicals using highly sensitive and inexpensive sensors is of great interest for many defense and consumer applications. In this paper we present ppb-level detection of dimethyl methylphosphonate (DMMP), a common simulant for sarin gas, with a ppt-level resolution using an improved capacitive micromachined ultrasonic transducer (CMUT) as a resonant chemical sensor. The improved CMUT operates at a higher resonant frequency of 47.7 MHz and offers an improved mass sensitivity of 48.8 zg/Hz/μm(2) by a factor of 2.7 compared to the previous CMUT sensors developed. A low-noise oscillator using the CMUT resonant sensor as the frequency-selective device was developed for real-time sensing, which exhibits an Allan deviation of 1.65 Hz (3σ) in the presence of a gas flow; this translates into a mass resolution of 80.5 zg/μm(2). The CMUT resonant sensor is functionalized with a 50-nm thick DKAP polymer developed at Sandia National Laboratory for dimethyl methylphosphonate (DMMP) detection. To demonstrate ppb-level detection of the improved chemical sensor system, the sensor performance was tested at a certified lab (MIT Lincoln Laboratory), which is equipped with an experimental chemical setup that reliably and accurately delivers a wide range of low concentrations down to 10 ppb. We report a high volume sensitivity of 34.5 ± 0.79 pptv/Hz to DMMP and a good selectivity of the polymer to DMMP with respect to dodecane and 1-octanol.

  19. Surface texture and hardness of dental alloys processed by alternative technologies

    Science.gov (United States)

    Porojan, Liliana; Savencu, Cristina E.; Topală, Florin I.; Porojan, Sorin D.

    2017-08-01

    Technological developments have led to the implementation of novel digitalized manufacturing methods for the production of metallic structures in prosthetic dentistry. These technologies can be classified as based on subtractive manufacturing, assisted by computer-aided design/computer-aided manufacturing (CAD/CAM) systems, or on additive manufacturing (AM), such as the recently developed laser-based methods. The aim of the study was to assess the surface texture and hardness of metallic structures for dental restorations obtained by alternative technologies: conventional casting (CST), computerized milling (MIL), AM power bed fusion methods, respective selective laser melting (SLM) and selective laser sintering (SLS). For the experimental analyses metallic specimens made of Co-Cr dental alloys were prepared as indicated by the manufacturers. The specimen structure at the macro level was observed by an optical microscope and micro-hardness was measured in all substrates. Metallic frameworks obtained by AM are characterized by increased hardness, depending also on the surface processing. The formation of microstructural defects can be better controlled and avoided during SLM and MIL process. Application of power bed fusion techniques, like SLS and SLM, is currently a challenge in dental alloys processing.

  20. Ion Beam and Plasma Technology Development for Surface Modification at Los Alamos National Laboratory

    Energy Technology Data Exchange (ETDEWEB)

    Davis, H.A.; Munson, C.P.; Wood, B.P.; Bitteker, L.J.; Nastasi, M.A.; Rej, D.J.; Waganaar, W.J.; Walter, K.C. [Los Alamos National Lab., NM (United States); Coates, D.M.; Schleinitz, H.M. [DuPont Central Research and Development, Wilmington, DE (United States)

    1997-12-31

    We are developing two high-throughput technologies for materials modification. The first is a repetitive intense ion beam source for materials modification through rapid surface melt and resolidification (up to 10{sup 10} deg/sec cooling rates) and for ablative deposition of coatings. The short range of the ions (typically 0.1 to 5 micrometers) allows vaporization or melting at moderate beam energy density (typically 1-50 J/cm{sup 2}). A new repetitive intense ion beam accelerator called CHAMP is under development at Los Alamos. The design beam parameters are: E=200 keV, I=15 kA, {tau}=1 {micro}s, and 1 Hz. This accelerator will enable applications such as film deposition, alloying and mixing, cleaning and polishing, corrosion and wear resistance, polymer surface treatments, and nanophase powder synthesis. The second technology is plasma source ion implantation (PSII) using plasmas generated from both gas phase (using radio frequency excitation) and solid phase (using a cathodic arc) sources. We have used PSII to directly implant ions for surface modification or as method for generating graded interfaces to enhance the adhesion of surface coatings. Surfaces with areas of up to 16 m{sup 2} and weighing more than a thousand kilograms have been treated in the Los Alamos PSII chamber. In addition, PSII in combination with cathodic source deposition has been used to form highly adherent, thick Er{sub 2}O{sub 3} coatings on steel for reactive metal containment in casting. These coatings resist delamination under extreme mechanical and thermal stress.

  1. Development of micro capacitive accelerometer for subsurface microseismic measurement; Micromachining ni yoru chika danseiha kenshutsu no tame no silicon yoryogata kasokudo sensor no seisaku

    Energy Technology Data Exchange (ETDEWEB)

    Nishizawa, M.; Niitsuma, H.; Esashi, M. [Tohoku University, Sendai (Japan). Faculty of Engineering

    1997-05-27

    A silicon capacitive accelerometer was fabricated to detect subsurface elastic waves by using micromachining technology. Characteristics required for it call for capability of detecting acceleration with amplitudes from 0.1 to 1 gal and flat amplitude characteristics in frequency bands of 10 Hz to several kHz. For the purpose of measuring transition phenomena, linear phase characteristics in the required bands must be guaranteed, cross sensitivity must be small, and resistance to water, pressure and heat is demanded. Sensitivity of the sensor is determined finally by noise level in a detection circuit. The sensor`s minimum detection capability was 40 mgal in the case of the distance between a weight and an electrode being 3 {mu}m. This specification value is a value realizable by the current micromachining technology. Dimensions for the weight and other members were decided with the natural frequency to make band width 2 kHz set to 4 kHz. Completion of the product has not been achieved yet, however, because of a problem that the weight gets stuck on the electrode plate in anode bonding in the assembly process. 7 refs., 5 figs., 1 tab.

  2. CONTROL OF METAL SURFACES MACHINED IN ACCORDANCE WITH THE DIAMOND NANOMACHINING TECHNOLOGY BASED ON THE ELECTRON WORK FUNCTION

    Directory of Open Access Journals (Sweden)

    G. V. Sharonov

    2015-01-01

    Full Text Available Dimensional machining technology is based on the use of integrated geometric parameters of machined surfaces. Technological impact of a pick results in oxidation processes and changes in physic-chemical parameters of surface. Control of only geometric parameters is insufficient to describe characteristics of machining and formation of ultra-smooth surfaces. The electron work function is therefore used. The aim of the work was to study electrophysical states of optic surfaces of non-ferrous metals and alloys in relation to geometric and physic-chemical parameters according to the distribution of the electron work function over the surface. We conducted the study on experimental metal samples made of copper and aluminum alloy, machined in accordance with the diamond nanomachining technology. The diamond nanomachining technology would be capable of ensuring the roughness of non-ferrous metals and alloys machined at the level of Ra ≤ 0,005 µm. Modernized Kelvin probe was used as the registration technique of the changes of the electron work function over the surface. Dependence between the electron work function value, as well as its alteration and the physicchemical and geometric parameters of a surface has been determined. It has been shown that the diamond nanomachining technology makes it possible to obtain electro-physically uniform optical surfaces on copper and aluminum alloy with the minimal range of the distribution of the electric potential over the surface

  3. Optical micromachined ultrasound transducers (OMUT) - a new approach for high resolution imaging

    Science.gov (United States)

    Tadayon, M. A.; Ashkenazi, S.

    2013-03-01

    Piezoelectric ultrasound (US) transducers are at the heart of almost any ultrasonic medical imaging probe. However, their sensitivity and reliability severely degrade in applications requiring high frequency (>20 MHz) and small element size (CMUT) and optical sensing and generation of ultrasound are being investigated. In this paper we present our first steps in developing optical micromachined ultrasound transducers (OMUT) technology. OMUTs rely on microfabrication techniques to construct micron-size air cavities capped by an elastic membrane. The membrane functions as the active ultrasound transmitter and receiver. We will describe the design and testing of prototype OMUT devices which implement a receive-only function. The cavity detector is an optical cavity which its top mirror is deflected under the application of pressure. The intensity of a reflected light beam is highly sensitive to displacement of the top membrane if the optical wavelength is at near-resonance condition. Therefore, US pulses can be detected by recording the reflected light intensity. The sensitivity of the device depends on the mechanical properties of the top membrane and optical characteristics of the optical cavity. The device was fabricated using SU8 as a structural material and gold as a mirror. We have developed a new bonding method to fabricate a sealed, low roughness, high quality optical cavity. The 60μm cavity with the 8.5 μm top membrane is tested in water with 25MHz ultrasound transducer. The NEP of the device for bandwidth of 28MHz was 9.25kPa. The optical cavity has a finesse of around 23.

  4. A smart fully integrated micromachined separator with soft magnetic micro-pillar arrays for cell isolation

    Science.gov (United States)

    Dong, Tao; Su, Qianhua; Yang, Zhaochu; Zhang, Yulong; Egeland, Eirik B.; Gu, Dan D.; Calabrese, Paolo; Kapiris, Matteo J.; Karlsen, Frank; Minh, Nhut T.; Wang, K.; Jakobsen, Henrik

    2010-11-01

    A smart fully integrated micromachined separator with soft magnetic micro-pillar arrays has been developed and demonstrated, which can merely employ one independent lab-on-chip to realize cell isolation. The simulation, design, microfabrication and test for the new electromagnetic micro separator were executed. The simulation results of the electromagnetic field in the separator show that special soft magnetic micro-pillar arrays can amplify and redistribute the electromagnetic field generated by the micro-coils. The separator can be equipped with a strong magnetic field to isolate the target cells with a considerably low input current. The micro separator was fabricated by micro-processing technology. An electroplating bath was hired to deposit NiCo/NiFe to fabricate the micro-pillar arrays. An experimental system was set up to verify the function of the micro separator by isolating the lymphocytes, in which the human whole blood mixed with Dynabeads® FlowComp Flexi and monoclonal antibody MHCD2704 was used as the sample. The results show that the electromagnetic micro separator with an extremely low input current can recognize and capture the target lymphocytes with a high efficiency, the separation ratio reaching more than 90% at a lower flow rate. For the electromagnetic micro separator, there is no external magnetizing field required, and there is no extra cooling system because there is less Joule heat generated due to the lower current. The magnetic separator is totally reusable, and it can be used to separate cells or proteins with common antigens.

  5. Modeling, Fabrication and Testing of a Customizable Micromachined Hotplate for Sensor Applications.

    Science.gov (United States)

    Tommasi, Alessio; Cocuzza, Matteo; Perrone, Denis; Pirri, Candido Fabrizio; Mosca, Roberto; Villani, Marco; Delmonte, Nicola; Zappettini, Andrea; Calestani, Davide; Marasso, Simone Luigi

    2016-12-30

    In the sensors field the active sensing material frequently needs a controlled temperature in order to work properly. In microsystems technology, micro-machined hotplates represent a platform consisting of a thin suspended membrane where the sensing material can be deposited, usually integrating electrical stimuli and temperature readout. The micro-hotplate ensures a series of advantages such as miniaturized size, fast response, high sensitivity, low power consumption and selectivity for chemical sensing. This work compares the coplanar and the buried approach for the micro-hotplate heaters design with the aim to optimize the fabrication process and to propose a guideline for the choice of the suitable design with respect to the applications. In particular, robust Finite Element Method (FEM) models are set up in order to predict the electrical and thermal behavior of the micro-hotplates. The multiphysics approach used for the simulation allows to match as close as possible the actual device to the predictive model: geometries, materials, physics have been carefully linked to the fabricated devices to obtain the best possible accuracy. The materials involved in the fabrication process are accurately selected in order to improve the yield of the process and the performance of the devices. The fabricated micro-hotplates are able to warm the active region up to 400 °C (with a corresponding power consumption equal to 250 mW @ 400 °C) with a uniform temperature distribution in the buried micro-hotplate and a controlled temperature gradient in the coplanar one. A response time of about 70 ms was obtained on the virtual model, which perfectly agrees with the one measured on the fabricated device. Besides morphological, electrical and thermal characterizations, this work includes reliability tests in static and dynamic modes.

  6. Modeling, Fabrication and Testing of a Customizable Micromachined Hotplate for Sensor Applications

    Directory of Open Access Journals (Sweden)

    Alessio Tommasi

    2016-12-01

    Full Text Available In the sensors field the active sensing material frequently needs a controlled temperature in order to work properly. In microsystems technology, micro-machined hotplates represent a platform consisting of a thin suspended membrane where the sensing material can be deposited, usually integrating electrical stimuli and temperature readout. The micro-hotplate ensures a series of advantages such as miniaturized size, fast response, high sensitivity, low power consumption and selectivity for chemical sensing. This work compares the coplanar and the buried approach for the micro-hotplate heaters design with the aim to optimize the fabrication process and to propose a guideline for the choice of the suitable design with respect to the applications. In particular, robust Finite Element Method (FEM models are set up in order to predict the electrical and thermal behavior of the micro-hotplates. The multiphysics approach used for the simulation allows to match as close as possible the actual device to the predictive model: geometries, materials, physics have been carefully linked to the fabricated devices to obtain the best possible accuracy. The materials involved in the fabrication process are accurately selected in order to improve the yield of the process and the performance of the devices. The fabricated micro-hotplates are able to warm the active region up to 400 °C (with a corresponding power consumption equal to 250 mW @ 400 °C with a uniform temperature distribution in the buried micro-hotplate and a controlled temperature gradient in the coplanar one. A response time of about 70 ms was obtained on the virtual model, which perfectly agrees with the one measured on the fabricated device. Besides morphological, electrical and thermal characterizations, this work includes reliability tests in static and dynamic modes.

  7. Comparison of eggshell surface sanitization technologies and impacts on consumer acceptability.

    Science.gov (United States)

    Al-Ajeeli, Morouj N; Taylor, T Matthew; Alvarado, Christine Z; Coufal, Craig D

    2016-05-01

    Shell eggs can be contaminated with many types of microorganisms, including bacterial pathogens, and thus present a risk for the transmission of foodborne disease to consumers. Currently, most United States egg processors utilize egg washing and sanitization systems to decontaminate surfaces of shell eggs prior to packaging. However, previous research has indicated that current shell egg sanitization technologies employed in the commercial egg industry may not completely eliminate bacteria from the surface of eggshells, and thus alternative egg sanitization technologies with the potential for increased microbial reductions on eggshells should be investigated. The objectives of this study were to compare the antimicrobial efficacy and consumer sensory attributes of industry-available eggshell sanitization methods (chlorine and quaternary ammonium compounds (QAC) applied via spray) to various alternative egg sanitization technologies. Eggs (White Leghorn hens; n=195) were obtained for evaluation of sanitizer-induced reduction in mesophilic aerobic bacteria (n=90) or inoculated Salmonella Enteritidis (SE) reduction (n=105). Sanitizing treatments evaluated in this experiment were: chlorine spray (100 ppm available chlorine), QAC spray (200 ppm), peracetic acid spray (PAA; 135 ppm) alone or in combination with ultraviolet light (UV; 254 nm), and hydrogen peroxide (H2O2; 3.5% solution) spray in combination with UV (H2O2+UV). For enumeration of aerobic bacteria, eggs were sampled at 0, 7, and 14 days of storage at 4°C; surviving SE cells from inoculated eggs were enumerated by differential plating. Sensory trials were conducted to determine consumer liking of scrambled eggs made from eggs sanitized with chlorine, QAC, H2O2+UV, or no treatment (control). The H2O2 and UV treatment resulted in the greatest reductions in eggshell aerobic plate counts compared to other treatments throughout egg storage (Peggs represents a novel technology that could have important

  8. A Three-Dimensional Enormous Surface Area Aluminum Microneedle Array with Nanoporous Structure

    Directory of Open Access Journals (Sweden)

    Po Chun Chen

    2013-01-01

    Full Text Available We proposed fabricating an aluminum microneedle array with a nanochannel structure on the surface by combining micromachining, electrolyte polishing, and anodization methods. The microneedle array provides a three-dimensional (3D structure that possesses several hundred times more surface area than a traditional nanochannel template. Therefore, the microneedle array can potentially be used in many technology applications. This 3D microneedle array device can not only be used for painless injection or extraction, but also for storage, highly sensitive detection, drug delivery, and microelectrodes. From the calculation we made, the microneedle array not only increases surface area, but also enlarges the capacity of the device. Therefore, the microneedle array can further be used on many detecting, storing, or drug delivering applications.

  9. A Three-Dimensional Enormous Surface Area Aluminum Microneedle Array with Nanoporous Structure

    International Nuclear Information System (INIS)

    Chen, P.Ch.; Zou, J.; Hsieh, Sh.J.; Chen, Ch.Ch.

    2013-01-01

    We proposed fabricating an aluminum micro needle array with a nano channel structure on the surface by combining micromachining, electrolyte polishing, and anodization methods. The micro needle array provides a three-dimensional (3D) structure that possesses several hundred times more surface area than a traditional nano channel template. Therefore, the micro needle array can potentially be used in many technology applications. This 3D micro needle array device can not only be used for painless injection or extraction, but also for storage, highly sensitive detection, drug delivery, and microelectrodes. From the calculation we made, the micro needle array not only increases surface area, but also enlarges the capacity of the device. Therefore, the micro needle array can further be used on many detecting, storing, or drug delivering applications.

  10. Photonic Mach-Zehnder modulators driven by surface acoustic waves in AlGaAs technology

    Science.gov (United States)

    Crespo-Poveda, A.; Gargallo, B.; Artundo, I.; Doménech, J. D.; Muñoz, P.; Hey, R.; Biermann, K.; Tahraoui, A.; Santos, P. V.; Cantarero, A.; de Lima, M. M.

    2014-03-01

    In this paper, photonic devices driven by surface acoustic waves and operating in the GHz frequency range are presented. The devices were designed and fabricated in (Al,Ga)As technology. In contrast to previously realized modulators, where part of the light transmission is lost due to destructive interference, in the present devices light only switches paths, avoiding losses. One of the devices presents two output channels with 180°-dephasing synchronization. Odd multiples of the fundamental driving frequency are enabled by adjusting the applied acoustic power. A second and more complex photonic integrated device, based on the acoustic modulation of tunable Arrayed Waveguide Gratings, is also proposed.

  11. Non-contact metrology of aspheric surfaces based on MWLI technology

    Science.gov (United States)

    Berger, G.; Petter, J.

    2013-09-01

    A non-contact optical scanning metrology solution measuring aspheric surfaces is presented, which is based on multi wavelength interferometry (MWLI). The technology yields high density 3D data in short measurement times (including set up time) and provides high, reproducible form measurement accuracy. It measures any asphere without restrictions in terms of spherical departures. In addition, measurement of a large variety of special optics is enabled, such as annular lenses, segmented optics, optics with diffractive steps, ground optics, optics made of opaque and transparent materials, and small and thin optics (e.g. smart phone lenses). The measurement instrument can be used under production conditions.

  12. Fabrication and characterization of a micromachined swirl-shaped ionic polymer metal composite actuator with electrodes exhibiting asymmetric resistance.

    Science.gov (United States)

    Feng, Guo-Hua; Liu, Kim-Min

    2014-05-12

    This paper presents a swirl-shaped microfeatured ionic polymer-metal composite (IPMC) actuator. A novel micromachining process was developed to fabricate an array of IPMC actuators on a glass substrate and to ensure that no shortcircuits occur between the electrodes of the actuator. We demonstrated a microfluidic scheme in which surface tension was used to construct swirl-shaped planar IPMC devices of microfeature size and investigated the flow velocity of Nafion solutions, which formed the backbone polymer of the actuator, within the microchannel. The unique fabrication process yielded top and bottom electrodes that exhibited asymmetric surface resistance. A tool for measuring surface resistance was developed and used to characterize the resistances of the electrodes for the fabricated IPMC device. The actuator, which featured asymmetric electrode resistance, caused a nonzero-bias current when the device was driven using a zero-bias square wave, and we propose a circuit model to describe this phenomenon. Moreover, we discovered and characterized a bending and rotating motion when the IPMC actuator was driven using a square wave. We observed a strain rate of 14.6% and a displacement of 700 μm in the direction perpendicular to the electrode surfaces during 4.5-V actuation.

  13. [Optimization of one-step pelletization technology of Jiuwei Xifeng granules by response surface methodology].

    Science.gov (United States)

    Wang, Xiu-hai; Yang, Xu-fang; Fan, Ye-wen; Zhang, Yan-jun; Xu, Zhong-kun; Yang, Lin-yong; Wang, Zhen-zhong; Xiao, Wei

    2014-12-01

    Using the qualified rates of particles as the evaluation indexes, the impact tactors of one-step pelletization technology of Jiuwei Xifeng granules were selected from six factors by the Plackett-Burman experimental design and the levels of non-significant factors were identified. According to the Plackett-Burman experimental design, choosing the qualified rates of particles and angle of repose as the evaluation indexes, three levels of the three factors were selected by Box-Behnken of central composite design to optimize the experimental. The best conditions were as follows: the fluid extract was sprayed with frequency of 29 r . min-1, inlet air temperature was 90 °C, the frequency of fan was 34 Hz. Under the response surface methodology optimized scheme, the average experimental results are similar to the predicted values, and surface methodology could be used in the optimization of one-step pelletization for Chinese materia medica.

  14. Development of batch producible hot embossing 3D nanostructured surface-enhanced Raman scattering chip technology

    Science.gov (United States)

    Huang, Chu-Yu; Tsai, Ming-Shiuan

    2017-09-01

    The main purpose of this study is to develop a batch producible hot embossing 3D nanostructured surface-enhanced Raman chip technology for high sensitivity label-free plasticizer detection. This study utilizing the AAO self-assembled uniform nano-hemispherical array barrier layer as a template to create a durable nanostructured nickel mold. With the hot embossing technique and the durable nanostructured nickel mold, we are able to batch produce the 3D Nanostructured Surface-enhanced Raman Scattering Chip with consistent quality. In addition, because of our SERS chip can be fabricated by batch processing, the fabrication cost is low. Therefore, the developed method is very promising to be widespread and extensively used in rapid chemical and biomolecular detection applications.

  15. Long-life micro vacuum chamber for a micromachined cryogenic cooler

    NARCIS (Netherlands)

    Cao, Haishan; Vermeer, Cristian Hendrik; Vanapalli, Srinivas; Holland, Herman J.; ter Brake, Hermanus J.M.

    2015-01-01

    Micromachined cryogenic coolers can be used for cooling small electronic devices to improve their performance. However, for reaching cryogenic temperatures, they require a very good thermal insulation from the warm environment. This is established by a vacuum space that for adequate insulation has

  16. Angular Random Walk Estimation of a Time-Domain Switching Micromachined Gyroscope

    Science.gov (United States)

    2016-10-19

    TECHNICAL DOCUMENT 3308 September 2016 Angular Random Walk Estimation of a Time-Domain Switching Micromachined Gyroscope Andrew B. Sabater Paul...angular random walk (ARW), bias instability, and scale factor instability. While there are methods to address issues with bias and scale factor...8 4. ANGULAR RANDOM WALK CHARACTERIZATION

  17. Sensitivity of Micromachined Joule-Thomson Cooler to Clogging Due to Moisture

    NARCIS (Netherlands)

    Cao, Haishan; Vanapalli, Srinivas; Holland, Herman J.; Vermeer, Cristian Hendrik; ter Brake, Hermanus J.M.

    2015-01-01

    A major issue in long-term operation of micromachined Joule-Thomson coolers is the clogging of the microchannels and/or the restriction due to the deposition of water molecules present in the working fluid. In this study, we present the performance of a microcooler operated with nitrogen gas with

  18. Femtosecond laser micromachining of polylactic acid/graphene composites for designing interdigitated microelectrodes for sensor applications

    Science.gov (United States)

    Paula, Kelly T.; Gaál, Gabriel; Almeida, G. F. B.; Andrade, M. B.; Facure, Murilo H. M.; Correa, Daniel S.; Riul, Antonio; Rodrigues, Varlei; Mendonça, Cleber R.

    2018-05-01

    There is an increasing interest in the last years towards electronic applications of graphene-based materials and devices fabricated from patterning techniques, with the ultimate goal of high performance and temporal resolution. Laser micromachining using femtosecond pulses is an attractive methodology to integrate graphene-based materials into functional devices as it allows changes to the focal volume with a submicrometer spatial resolution due to the efficient nonlinear nature of the absorption, yielding rapid prototyping for innovative applications. We present here the patterning of PLA-graphene films spin-coated on a glass substrate using a fs-laser at moderate pulse energies to fabricate interdigitated electrodes having a minimum spatial resolution of 5 μm. Raman spectroscopy of the PLA-graphene films indicated the presence of multilayered graphene fibers. Subsequently, the PLA-graphene films were micromachined using a femtosecond laser oscillator delivering 50-fs pulses and 800 nm, where the pulse energy and scanning speed was varied in order to determine the optimum irradiation parameters (16 nJ and 100 μm/s) to the fabrication of microstructures. The micromachined patterns were characterized by optical microscopy and submitted to electrical measurements in liquid samples, clearly distinguishing all tastes tested. Our results confirm the femtosecond laser micromachining technique as an interesting approach to efficiently pattern PLA-graphene filaments with high precision and minimal mechanical defects, allowing the easy fabrication of interdigitated structures and an alternative method to those produced by conventional photolithography.

  19. A micromachined silicon valve driven by a miniature bi-stable electro-magnetic actuator

    NARCIS (Netherlands)

    Bohm, S.; Burger, G.J.; Burger, G.J.; Korthorst, M.T.; Roseboom, F.

    2000-01-01

    In this paper a novel combination of a micromachined silicon valve with low dead volume and a bi-stable electromagnetic actuator produced by conventional machining is presented. The silicon valve part, 7×7×1 mm3 in dimensions, is a sandwich construction of two KOH etched silicon wafers with a layer

  20. New technique for fabrication of high frequency piezoelectric Micromachined Ultrasound Transducers

    DEFF Research Database (Denmark)

    Pedersen, T; Thomsen, Erik Vilain; Zawada, T

    2008-01-01

    A novel technique for fabrication of linear arrays of high frequency piezoelectric Micromachined Ultrasound Transducers (pMUT) on silicon substrates is presented. Piezoelectric elements are formed by deposition of PZT ((PbZrxTi1-x)O3) into etched features of the silicon substrate...

  1. Unique Femtosecond Micromachining Methods in Semi-Insulating and Conducting Silicon Carbide (Preprint)

    National Research Council Canada - National Science Library

    Brewer, Chris; Dorsey, Don; Campbell, Angela; Juhl, Shane; DesAutels, G. L; Finet, Marc; Ristich, Scott; Whitaker, Matt; Powers, Peter E; Zhan, Qiwen

    2007-01-01

    ...); a wide bandgap semiconductor material provided by Wright-Patterson AFB AFRL/MLPS. Gratings were micro-machined into these materials using a novel anamorphic lens design and an automated x, y, z linear stage to control the sample position...

  2. Separation and Detection of Toxic Gases with a Silicon Micromachined Gas Chromatography System

    Science.gov (United States)

    Kolesar, Edward S.; Reston, Rocky R.

    1995-01-01

    A miniature gas chromatography (GC) system was designed and fabricated using silicon micromachining and integrated circuit (IC) processing techniques. The silicon micromachined gas chromatography system (SMGCS) is composed of a miniature sample injector that incorporates a 10 microliter sample loop; a 0.9 meter long, rectangular shaped (300 micrometer width and 10 micrometer height) capillary column coated with a 0.2 micrometer thick copper phthalocyanine (CuPc) stationary phase; and a dual detector scheme based upon a CuPc-coated chemiresistor and a commercially available 125 micrometer diameter thermal conductivity detector (TCD) bead. Silicon micromachining was employed to fabricate the interface between the sample injector and the GC column, the column itself, and the dual detector cavity. A novel IC thin-film processing technique was developed to sublime the CuPc stationary phase coating on the column walls that were micromachined in the host silicon wafer substrate and Pyrex (r) cover plate, which were then electrostatically bonded together. The SMGCS can separate binary gas mixtures composed of parts-per-million (ppm) concentrations of ammonia (NH3) and nitrogen dioxide (NO2) when isothermally operated (55-80 degrees C). With a helium carrier gas and nitrogen diluent, a 10 microliter sample volume containing ammonia and nitrogen dioxide injected at 40 psi ((2.8 x 10(exp 5)Pa)) can be separated in less than 30 minutes.

  3. Batch fabrication of scanning microscopy probes for thermal and magnetic imaging using standard micromachining

    NARCIS (Netherlands)

    Sarajlic, Edin; Vermeer, Rolf; Delalande, M.Y.; Siekman, Martin Herman; Huijink, R.; Fujita, H.; Abelmann, Leon

    2010-01-01

    We present a process for batch fabrication of a novel scanning microscopy probe for thermal and magnetic imaging using standard micromachining and conventional optical contact lithography. The probe features an AFM-type cantilever with a sharp pyramidal tip composed of four freestanding silicon

  4. Energy Saving Melting and Revert Reduction Technology (Energy-SMARRT): Surface/Near Surface Indication - Characterization of Surface Anomalies from Magnetic Particle and Liquid Penetrant Indications

    Energy Technology Data Exchange (ETDEWEB)

    Griffin, John A. [Univ. of Alabama, Birmingham, AL (United States). Material Science & Engineering Dept.

    2014-02-20

    The systematic study and characterization of surface indications has never been conducted. Producers and users of castings do not have any data on which they can reliably communicate the nature of these indications or their effect on the performance of parts. Clearly, the ultimate intent of any work in this area is to eliminate indications that do in fact degrade properties. However, it may be impractical physically and/or financially to eliminate all surface imperfections. This project focused on the ones that actually degrade properties. The initial work was to identify those that degrade properties. Accurate numerical simulations of casting service performance allow designers to use the geometric flexibility of castings and the superior properties of steel to produce lighter weight and more energy efficient components for transportation systems (cars and trucks), construction, and mining. Accurate simulations increase the net melting energy efficiency by improving casting yield and reducing rework and scrap. Conservatively assuming a 10% improvement in yield, approximately 1.33 x 1012 BTU/year can be saved with this technology. In addition, CO2 emissions will be reduced by approximately 117,050 tons per year.

  5. RISK ASSESSMENT OF SURFACE WATERS ASSOCIATED WITH WATER CIRCULATION TECHNOLOGIES ON TROUT FARMS

    Directory of Open Access Journals (Sweden)

    Marcin Sidoruk

    2014-07-01

    Full Text Available Dynamic development of aquaculture has led to an increasing impact on the status of surface waters. Fish production generates wastes that, at high concentrations, may present a serious risk to the aquatic environment. Studies on the assessment of the impact of water management technologies in trout production on the quality of surface waters were conducted in 2011. Six farms were selected for the studies and were divided into two groups based on water management solutions (n = 3: farms with a flow through system (FTS and farms with a recirculation aquaculture system (RAS. On all farms, water measurement points were set and they depicted the quality of inflow water, the quality of water in ponds and the quality of outflow water. The studies did not demonstrate any impact of applied technology on electrolyte conductivity or calcium and magnesium concentrations in outflow water from a trout operation. In addition, it was found that the use of water for production purposes resulted in a slight increase in phosphorus and total nitrogen concentrations in waste waters.

  6. Development of Innovative Technology to Provide Low-Cost Surface Atmospheric Observations in Data Sparse Regions

    Science.gov (United States)

    Kucera, Paul; Steinson, Martin

    2017-04-01

    Accurate and reliable real-time monitoring and dissemination of observations of surface weather conditions is critical for a variety of societal applications. Applications that provide local and regional information about temperature, precipitation, moisture, and winds, for example, are important for agriculture, water resource monitoring, health, and monitoring of hazard weather conditions. In many regions of the World, surface weather stations are sparsely located and/or of poor quality. Existing stations have often been sited incorrectly, not well-maintained, and have limited communications established at the site for real-time monitoring. The University Corporation for Atmospheric Research (UCAR)/National Center for Atmospheric Research (NCAR), with support from USAID, has started an initiative to develop and deploy low-cost weather instrumentation in sparsely observed regions of the world. The project is focused on improving weather observations for environmental monitoring and early warning alert systems on a regional to global scale. Instrumentation that has been developed use innovative new technologies such as 3D printers, Raspberry Pi computing systems, and wireless communications. The goal of the project is to make the weather station designs, software, and processing tools an open community resource. The weather stations can be built locally by agencies, through educational institutions, and residential communities as a citizen effort to augment existing networks to improve detection of natural hazards for disaster risk reduction. The presentation will provide an overview of the open source weather station technology and evaluation of sensor observations for the initial networks that have been deployed in Africa.

  7. Desert water harvesting from TAKYR surfaces: assessing the potential of traditional and experimental technologies in the karakum

    NARCIS (Netherlands)

    Fleskens, L.; Ataev, A.; Mamedov, B.; Spaan, W.P.

    2007-01-01

    From historical times the traditionally nomadic people in desert environments of Turkmenistan have applied a range of innovative technologies to secure water supply for consumptive and productive purposes. These technologies make use of takyrs, flat or slightly sloping dense clay surfaces which act

  8. Self-Healing Technologies for Wiring and Surfaces in Aerospace and Deep Space Exploration Applications

    Science.gov (United States)

    Williams, Martha Kay; Gibson, Tracy L.; Jolley, Scott T.; Caraccio-Meier, Anne Joan

    2017-01-01

    Self-healing technologies have been identified as critical technology gaps for future exploration. NASA and KSC have been working in this area for multiple years with established intellectual property; however, there are many challenges that remain in this area of research. How do we mimic what the body does so naturally when we as NASA have unique requirements? We have been investigating several mechanisms for self-healing: microencapsulation with a healant core to fill in voids in the case of mechanical puncture and flowable (or sealable)systems that have inherent chemical properties that allow the materials to flow back together when cut or damaged. The microcapsules containing healant have to be durable and robust, must be able to take high temperatures to meet NASA unique requirements, provide good capillary flow of the healant, and be small in diameters to fill in damage voids in thin films or surfaces. Sealable systems have to flow in a range of temperatures and yet be lightweight and chemically resistant. The systems currently being developed are based on polyimide and polyurethane matrices and have been studied for use in high performance wiring systems, inflatable systems, and habitation structures. Self-healing or self-sealing capability would significantly reduce maintenance requirements and increase the safety and reliability performance of critical systems. Advances in these self-healing technologies and some of the unique challenges needed to be overcome in order to incorporate a self-healing mechanism into wiring or thin films systems will be addressed.

  9. A Novel Particulate Matter 2.5 Sensor Based on Surface Acoustic Wave Technology

    Directory of Open Access Journals (Sweden)

    Jiuling Liu

    2018-01-01

    Full Text Available Design, fabrication and experiments of a miniature particulate matter (PM 2.5 sensor based on the surface acoustic wave (SAW technology were proposed. The sensor contains a virtual impactor (VI for particle separation, a thermophoretic precipitator (TP for PM2.5 capture and a SAW sensor chip for PM2.5 mass detection. The separation performance of the VI was evaluated by using the finite element method (FEM model and the PM2.5 deposition characteristic in the TP was obtained by analyzing the thermophoretic theory. Employing the coupling-of-modes (COM model, a low loss and high-quality SAW resonator was designed. By virtue of the micro electro mechanical system (MEMS technology and semiconductor technology, the SAW based PM2.5 sensor detecting probe was fabricated. Then, combining a dual-port SAW oscillator and an air sampler, the experimental platform was set up. Exposing the PM2.5 sensor to the polystyrene latex (PSL particles in a chamber, the sensor performance was evaluated. The results show that by detecting the PSL particles with a certain diameter of 2 μm, the response of the SAW based PM2.5 sensor is linear, and in accordance with the response of the light scattering based PM2.5 monitor. The developed SAW based PM2.5 sensor has great potential for the application of airborne particle detection.

  10. Stacking technology for a space constrained microsystem

    DEFF Research Database (Denmark)

    Heschel, Matthias; Kuhmann, Jochen Friedrich; Bouwstra, Siebe

    1998-01-01

    In this paper we present a stacking technology for an integrated packaging of an intelligent transducer which is formed by a micromachined silicon transducer and an integrated circuit chip. Transducer and circuitry are stacked on top of each other with an intermediate chip in between. The bonding...

  11. Comparison between microfabrication technologies for metal tooling

    DEFF Research Database (Denmark)

    Uriarte, L.; Herrero, A.; Ivanov, A.

    2006-01-01

    microtechnologies for processing tooling inserts made of metal. The following technologies have been analysed: micromilling, micro-electrodischarge machining (EDM, including wire-EDM, sinking-EDM, and EDM-milling), laser micromachining, electroforming, and electrochemical milling (ECF) (an electrochemical machining...

  12. Comparison between Microfabrication Technologies for Metal Tooling

    DEFF Research Database (Denmark)

    Tang, Peter Torben

    2005-01-01

    of metal. The following technologies have been analysed: micromilling, microEDM (microelectro discharge machining, including wire-EDM, sinking-EDM and EDM-milling), laser micromachining, electroforming and ECF (an innovative process proposed by HSG-IMAT). Considered materials are nickel for electroforming...

  13. Development of micro capacitive accelerometer for subsurface microseismic measurement. Second Report; Micromachining ni yoru chika danseiha kenshutsu no tame no silicone yoryogata kasokudo sensor no seisaku. 2

    Energy Technology Data Exchange (ETDEWEB)

    Nishizawa, M.; Lim, G.; Niitsuma, H.; Esashi, M. [Tohoku University, Sendai (Japan)

    1997-10-22

    Micromachining-aided manufacture is under way of a silicon capacitive accelerator sensor, high in sensitivity and broad in bandwidth, for detecting subsurface microseismic waves. The sensor detects acceleration by use of changes in capacities of the top and bottom capacitors generated when a spring-supported weight experiences displacement upon application of acceleration to the said weight. A diode bridge circuit is employed as the circuit for detecting acceleration. As for sensitivity of the sensor, when the virtual noise inputted into the electronic circuit is presumed at 1{mu}V and the circuit driving voltage at 5V, the sensor minimum detectability will be 2.5mgal in the presence of a 3{mu}m gap between the weight and an electrode plate. The natural vibration frequency is set at 1kHz. Such specifications may be realized using the current micromachining technology, and possibilities are that the bandwidth will be further expanded when the sensor is used in a servo-type configuration. The effort is still at the stage of acceleration sensor manufacturing, with a stopper just formed for the silicon weight. 9 refs., 6 figs., 1 tab.

  14. Progress in Bacillus subtilis Spore Surface Display Technology towards Environment, Vaccine Development, and Biocatalysis.

    Science.gov (United States)

    Chen, Huayou; Ullah, Jawad; Jia, Jinru

    2017-01-01

    Spore surface display is the most desirable with enhanced effects, low cost, less time consuming and the most promising technology for environmental, medical, and industrial development. Spores have various applications in industry due to their ability to survive in harsh industrial processes including heat resistance, alkaline tolerance, chemical tolerance, easy recovery, and reusability. Yeast and bacteria, including gram-positive and -negative, are the most frequently used organisms for the display of various proteins (eukaryotic and prokaryotic), but unlike spores, they can rupture easily due to nutritive properties, susceptibility to heat, pH, and chemicals. Hence, spores are the best choice to avoid these problems, and they have various applications over nonspore formers due to amenability for laboratory purposes. Various strains of Clostridium and Bacillus are spore formers, but the most suitable choice for display is Bacillus subtilis because, according to the WHO, it is safe to humans and considered as "GRAS" (generally recognized as safe). This review focuses on the application of spore surface display towards industries, vaccine development, the environment, and peptide library construction, with cell surface display for enhanced protein expression and high enzymatic activity. Different vectors, coat proteins, and statistical analyses can be used for linker selection to obtain greater expression and high activity of the displayed protein. © 2017 S. Karger AG, Basel.

  15. Evaluation of flyash surface phenomena and the application of surface analysis technology. Summary report: Phase I. [44 elements; 86 references

    Energy Technology Data Exchange (ETDEWEB)

    Smith, R.D.

    1981-06-01

    The factors governing the formation of flyash surfaces during and following coal combustion are reviewed. The competing chemical and physical processes during the evolution of inorganic material in coal during combustion into flyash are described with respect to various surface segregation processes. Two mechanisms leading to surface enrichment are volatilization-condensation processes and diffusion processes within individual flyash particles. The experimental evidence for each of these processes is reviewed. It is shown that the volatilization-condensation process is the major factor leading to trace element enrichment in smaller flyash particles. Evidence also exists from surface analyses of flyash and representative mineral matter that diffusion processes may lead to surface enrichment of elements not volatilized or cause transport of surface-condensed elements into the flyash matrix. The semiquantitative determination of the relative importance of these two processes can be determined by comparison of concentration versus particle size profiles with surface-depth profiles obtained using surface analysis techniques. A brief description of organic transformations on flyash surfaces is also presented. The various surface analytical techniques are reviewed and the relatively new technique of Static-Secondary Ion Mass Spectroscopy is suggested as having significant advantages in studies of surfaces and diffusion processes in model systems. Several recommendations are made for research relevant to flyash formation and processes occurring on flyash surfaces.

  16. Development of Innovative Technology to Provide Low-Cost Surface Atmospheric Observations

    Science.gov (United States)

    Kucera, Paul; Steinson, Martin

    2016-04-01

    Accurate and reliable real-time monitoring and dissemination of observations of surface weather conditions is critical for a variety of societal applications. Applications that provide local and regional information about temperature, precipitation, moisture, and winds, for example, are important for agriculture, water resource monitoring, health, and monitoring of hazard weather conditions. In many regions in Africa (and other global locations), surface weather stations are sparsely located and/or of poor quality. Existing stations have often been sited incorrectly, not well-maintained, and have limited communications established at the site for real-time monitoring. The US National Weather Service (NWS) International Activities Office (IAO) in partnership with University Corporation for Atmospheric Research (UCAR)/National Center for Atmospheric Research (NCAR) and funded by the United States Agency for International Development (USAID) Office of Foreign Disaster Assistance (OFDA) has started an initiative to develop and deploy low-cost weather instrumentation in sparsely observed regions of the world. The goal is to provide observations for environmental monitoring, and early warning alert systems that can be deployed at weather services in developing countries. Instrumentation is being designed using innovative new technologies such as 3D printers, Raspberry Pi computing systems, and wireless communications. The initial effort is focused on designing a surface network using GIS-based tools, deploying an initial network in Zambia, and providing training to Zambia Meteorological Department (ZMD) staff. The presentation will provide an overview of the project concepts, design of the low cost instrumentation, and initial experiences deploying a surface network deployment in Zambia.

  17. The Mobile Surface Contamination Monitor II environmental radiological characterization utilizing GPS/GIS technologies

    International Nuclear Information System (INIS)

    Wendling, M.A.

    1993-05-01

    Time, cost, and most importantly quality of data are the three factors to measure the success of field radiological characterizations. The application of coupling radiation detection instrumentation to a GPS receiver has dramatically increased the data quality achievable compared to traditional environmental radiological survey methods. Improvements in verifying adequate spatial coverage of an area while collecting data and at,the same time reducing field time requirements can be realized. Data acquired during the recent implementation of the Mobile Surface Contamination Monitor 11 (MSCM-11) will be presented to demonstrate the advantages of this system over traditional radiological survey methods. The comparison will include time and manpower requirements. Linking the complimentary GPS, GIS and radiation detection technologies on a mobile tractor based platform has provided a tool to provide radiological characterization data faster, cheaper, and better to assist in the Environmental Restoration Mission of the Hanford Site

  18. Hot Structure Control Surface Progress for X-37 Technology Development Program

    Science.gov (United States)

    Valentine, P. G.; Meyer, David L. (Editor); Snow, Holly (Editor)

    2004-01-01

    The NASA Marshall Space Flight Center (MSFC) has been leading the development of technologies that will enable the development, fabrication, and flight of the automated X-37 Orbital Vehicle (OV). With the Administration s recent announcement of the Vision for Space Exploration, NASA placed the X-37 OV design on hold while developing detailed requirements for a Crew Exploration Vehicle, but has continued funding the development of high-risk, critical technologies for potential future space exploration vehicle applications. Hot Structure Control Surfaces (HSCS) technology development is one of the high-priority areas being funded at this time. The goal of HSCS research is to mitigate risk by qualifying the lightest possible components that meet the stringent X-37 OV weight and performance requirements, including Shuttle-type reen- try environments with peak temperatures of 2800 OF. The small size of the X-37 OV (25.7-feet long and 14.9-foot wingspan) drives the need for advanced HSCS because the vehicle's two primary aerodynamic surfaces, the flaperons and ruddervators, have thicknesses ranging from approximately 5 in. down to 1 in. Traditional metallic or polymer-matrix composites covered with tile or blanket thermal protection system (TPS) materials cannot be used as there is insufficient volume to fabricate such multi-component structures. Therefore, carbon-carbon (C-C) and carbodsilicon-carbide (C-SiC) composite HSCS structures are being developed in parallel by two teams supporting the X-37 prime contractor (The Boeing Company). The Science Applications International Coy. (SAIC) and Carbon-Carbon Advanced Technologies, Inc. (C-CAT) team is developing the C-C HSCS, while the General Electric Energy Power Systems Composites (GE-PSC) and Materials Research and Design (MRD) team is developing the C-SiC HSCS. These two teams were selected to reduce the high level of risk associated with developing advanced control surface components. They have continued HSCS

  19. Testing of an Annular Linear Induction Pump for the Fission Surface Power Technology Demonstration Unit

    Science.gov (United States)

    Polzin, K. A.; Pearson, J. B.; Webster, K.; Godfoy, T. J.; Bossard, J. A.

    2013-01-01

    Results of performance testing of an annular linear induction pump that has been designed for integration into a fission surface power technology demonstration unit are presented. The pump electromagnetically pushes liquid metal (NaK) through a specially-designed apparatus that permits quantification of pump performance over a range of operating conditions. Testing was conducted for frequencies of 40, 55, and 70 Hz, liquid metal temperatures of 125, 325, and 525 C, and input voltages from 30 to 120 V. Pump performance spanned a range of flow rates from roughly 0.3 to 3.1 L/s (4.8 to 49 gpm), and pressure heads of <1 to 104 kPa (<0.15 to 15 psi). The maximum efficiency measured during testing was 5.4%. At the technology demonstration unit operating temperature of 525 C the pump operated over a narrower envelope, with flow rates from 0.3 to 2.75 L/s (4.8 to 43.6 gpm), developed pressure heads from <1 to 55 kPa (<0.15 to 8 psi), and a maximum efficiency of 3.5%. The pump was supplied with three-phase power at 40 and 55 Hz using a variable-frequency motor drive, while power at 55 and 70 Hz was supplied using a variable-frequency power supply. Measured performance of the pump at 55 Hz using either supply exhibited good quantitative agreement. For a given temperature, the peak in efficiency occurred at different flow rates as the frequency was changed, but the maximum value of efficiency was relative insensitive within 0.3% over the frequency range tested, including a scan from 45 to 78 Hz. The objectives of the FSP technology project are as follows:5 • Develop FSP concepts that meet expected surface power requirements at reasonable cost with added benefits over other options. • Establish a nonnuclear hardware-based technical foundation for FSP design concepts to reduce overall development risk. • Reduce the cost uncertainties for FSP and establish greater credibility for flight system cost estimates. • Generate the key nonnuclear products to allow Agency

  20. [Optimization of one-step pelletization technology of Fuke IV granules with response surface methodology].

    Science.gov (United States)

    Liu, Dan; He, Feng-Jun; Liu, Chang-Long; Liu, Jun-Chao; Wu, Yun; Wang, Zhen-Zhong; Xiao, Wei

    2016-01-01

    To optimize the one-step pelletization technology of Fuke IV (FKIV) granules by response surface methodology. With the qualified rate of granules as evaluation indexes, 6 factors affecting one-step pelletization technology were investigated, significant levels of each factor were evaluated and the primal influential factors were determined by Plackett-Burman experimental design. According to the Plackett-Burman experimental design, the qualified rates of granules, moisture capacity and angle of repose as the evaluation indexes, Box-Behnken design with three levels and three factors was established for quadratic regression fitting of the models. Then the experimental results were optimized by Response Optimizer. The best process conditions were determined as follows: the extract relative density of 1.20, inlet air temperature of 88 ℃, and atomization pressure of 0.28 MPa. FKIV granules were prepared by the optimized experimental scheme. The determined qualified rate, moisture capacity and angle of response were 93.65%, 3.76% and 23.19° respectively for the granules, basically similar to the predicted values, indicating that the optimal process conditions were in line with the manufacturing requirements. Copyright© by the Chinese Pharmaceutical Association.

  1. [Response surface method optimize of nano-silica solid dispersion technology assistant enzymatic hydrolysis preparation genistein].

    Science.gov (United States)

    Jin, Xin; Zhang, Zhen-Hai; Zhu, Jing; Sun, E; Yu, Dan-Hong; Chen, Xiao-Yun; Liu, Qi-Yuan; Ning, Qing; Jia, Xiao-Bin

    2012-04-01

    This article reports that nano-silica solid dispersion technology was used to raise genistein efficiency through increasing the enzymatic hydrolysis rate. Firstly, genistin-nano-silica solid dispersion was prepared by solvent method. And differential scanning calorimetry (DSC) and transmission electron microscopy (TEM) were used to verify the formation of solid dispersion, then enzymatic hydrolysis of solid dispersion was done by snailase to get genistein. With the conversion of genistein as criteria, single factor experiments were used to study the different factors affecting enzymatic hydrolysis of genistin and its solid dispersion. And then, response surface method was used to optimize of nano-silica solid dispersion technology assistant enzymatic hydrolysis. The optimum condition to get genistein through enzymatic hydrolysis of genistin-nano-silica solid dispersion was pH 7.1, temperature 52.2 degrees C, enzyme concentration 5.0 mg x mL(-1) and reaction time 7 h. Under this condition, the conversion of genistein was (93.47 +/- 2.40)%. Comparing with that without forming the genistin-nano-silica solid dispersion, the conversion increased 2.62 fold. At the same time, the product of hydrolysis was purified to get pure genistein. The method of enzymatic hydrolysis of genistin-nano-silica solid dispersion by snailase to obtain genistein is simple, efficiency and suitable for the modern scale production.

  2. Adaptable Deployable Entry & Placement Technology (ADEPT) for Cubesat Delivery to Mars Surface

    Science.gov (United States)

    Wercinski, Paul

    2014-01-01

    The Adaptable, Deployable Entry and Placement Technology (ADEPT), uses a mechanical skeleton to deploy a revolutionary carbon fabric system that serves as both heat shield and primary structure during atmospheric entry. The NASA ADEPT project, currently funded by the Game Changing Development Program in STMD is currently focused on 1m class hypersonic decelerators for the delivery of very small payloads ( 5 kg) to locations of interest in an effort to leverage low-cost platforms to rapidly mature the technology while simultaneously delivering high-value science. Preliminary mission design and aerothermal performance testing in arcjets have shown the ADEPT system is quite capable of safe delivery of cubesats to Mars surface. The ability of the ADEPT to transit to Mars in a stowed configuration (similar to an umbrella) provides options for integration with the Mars 2020 cruise stage, even to consider multiple ADEPTs. System-level test campaigns are underway for FY15 execution or planning for FY16. These include deployment testing, wind tunnel testing, system-level arc jet testing, and a sounding rocket flight test. The goal is system level maturation (TRL 6) at a 1m class Mars design reference mission configuration.

  3. A review of the biomaterials technologies for infection-resistant surfaces.

    Science.gov (United States)

    Campoccia, Davide; Montanaro, Lucio; Arciola, Carla Renata

    2013-11-01

    Anti-infective biomaterials need to be tailored according to the specific clinical application. All their properties have to be tuned to achieve the best anti-infective performance together with safe biocompatibility and appropriate tissue interactions. Innovative technologies are developing new biomaterials and surfaces endowed with anti-infective properties, relying either on antifouling, or bactericidal, or antibiofilm activities. This review aims at thoroughly surveying the numerous classes of antibacterial biomaterials and the underlying strategies behind them. Bacteria repelling and antiadhesive surfaces, materials with intrinsic antibacterial properties, antibacterial coatings, nanostructured materials, and molecules interfering with bacterial biofilm are considered. Among the new strategies, the use of phages or of antisense peptide nucleic acids are discussed, as well as the possibility to modulate the local immune response by active cytokines. Overall, there is a wealth of technical solutions to contrast the establishment of an implant infection. Many of them exhibit a great potential in preclinical models. The lack of well-structured prospective multicenter clinical trials hinders the achievement of conclusive data on the efficacy and comparative performance of anti-infective biomaterials. © 2013 Elsevier Ltd. All rights reserved.

  4. The industrial logistic surface: Displaying the impact of energy policy on uptake of new technologies

    International Nuclear Information System (INIS)

    Mathews, John A.; Baroni, Paolo

    2013-01-01

    Two processes are widely viewed as fundamental to the transition from conventional fossil-fuelled energy systems to renewable powered systems that is under way. There is firstly the progressive reduction in costs as investment, or production/energy generating capacity, grows. To see the uptake itself we need a second process, captured as a logistic curve (or S-shaped curve) that depicts the uptake of the new technology as an industrial substitution process unfolding over time. In this paper we put these two processes together, deriving a single expression that depicts uptake as a function of both cumulative investment and time, where the key parameter can be related to the learning coefficient. We display this expression in the form of a 3-dimensional surface that we dub the Logistic Industrial Surface. It is applied to a real case involving cost reduction and logistic uptake of solar PV (photovoltaic) cells. In this specific case, we estimate the learning curve involved and on this basis calculate that (for an initial time period) early in the trajectory a cost reduction of 8.7% would be associated with an increase in investment of 10%, leading to an increase in uptake by 4.35%; whereas a cost reduction of 44% (corresponding to a doubling of investment) would lead to a more rapid uptake of 41.95%. We claim that this is the first demonstration in the literature of a direct connection between investment levels, cost reductions and consequent levels of uptake according to logistic industrial dynamics. - Highlights: • We derive an expression which combines learning curves with logistic uptake. • This expression is termed an ILS (industrial logistic surface). • We illustrate the ILS through different investment schedules. • We apply the new framework to the case of solar PV cost reductions and uptake. • We demonstrate the workings of the ILS with a numerical example

  5. Optimized design of micromachined electric field mills to maximize electrostatic field sensitivity

    Directory of Open Access Journals (Sweden)

    Yu Zhou

    2016-07-01

    Full Text Available This paper describes the design optimization of a micromachined electric field mill, in relation to maximizing its output signal. The cases studied are for a perforated electrically grounded shutter vibrating laterally over sensing electrodes. It is shown that when modeling the output signal of the sensor, the differential charge on the sense electrodes when exposed to vs. visibly shielded from the incident electric field must be considered. Parametric studies of device dimensions show that the shutter thickness and its spacing from the underlying electrodes should be minimized as these parameters very strongly affect the MEFM signal. Exploration of the shutter perforation size and sense electrode width indicate that the best MEFM design is one where shutter perforation widths are a few times larger than the sense electrode widths. Keywords: MEFM, Finite element method, Electric field measurement, MEMS, Micromachining

  6. Femtosecond laser micro-machined polyimide films for cell scaffold applications.

    Science.gov (United States)

    Antanavičiūtė, Ieva; Šimatonis, Linas; Ulčinas, Orestas; Gadeikytė, Aušra; Abakevičienė, Brigita; Tamulevičius, Sigitas; Mikalayeva, Valeryia; Skeberdis, Vytenis Arvydas; Stankevičius, Edgaras; Tamulevičius, Tomas

    2018-02-01

    Engineering of sophisticated synthetic 3D scaffolds that allow controlling behaviour and location of the cells requires advanced micro/nano-fabrication techniques. Ultrafast laser micro-machining employing a 1030-nm wavelength Yb:KGW femtosecond laser and a micro-fabrication workstation for micro-machining of commercially available 12.7 and 25.4 μm thickness polyimide (PI) film was applied. Mechanical properties of the fabricated scaffolds, i.e. arrays of differently spaced holes, were examined via custom-built uniaxial micro-tensile testing and finite element method simulations. We demonstrate that experimental micro-tensile testing results could be numerically simulated and explained by two-material model, assuming that 2-6 μm width rings around the holes possessed up to five times higher Young's modulus and yield stress compared with the rest of the laser intacted PI film areas of 'dog-bone'-shaped specimens. That was attributed to material modification around the micro-machined holes in the vicinity of the position of the focused laser beam track during trepanning drilling. We demonstrate that virgin PI films provide a suitable environment for the mobility, proliferation and intercellular communication of human bone marrow mesenchymal stem cells, and discuss how cell behaviour varies on the micro-machined PI films with holes of different diameters (3.1, 8.4 and 16.7 μm) and hole spacing (30, 35, 40 and 45 μm). We conclude that the holes of 3.1 μm diameter were sufficient for metabolic and genetic communication through membranous tunneling tubes between cells residing on the opposite sides of PI film, but prevented the trans-migration of cells through the holes. Copyright © 2016 John Wiley & Sons, Ltd. Copyright © 2016 John Wiley & Sons, Ltd.

  7. Optimized design of micromachined electric field mills to maximize electrostatic field sensitivity

    OpenAIRE

    Zhou, Yu; Shafai, Cyrus

    2016-01-01

    This paper describes the design optimization of a micromachined electric field mill, in relation to maximizing its output signal. The cases studied are for a perforated electrically grounded shutter vibrating laterally over sensing electrodes. It is shown that when modeling the output signal of the sensor, the differential charge on the sense electrodes when exposed to vs. visibly shielded from the incident electric field must be considered. Parametric studies of device dimensions show that t...

  8. Fabrication of Micromachined SnO2 Based MOS Gas Sensor with Inbuilt Microheater for Detection of Methanol

    Directory of Open Access Journals (Sweden)

    Priyanka Kakoty

    2016-09-01

    Full Text Available This paper presents a simple method to fabricate a vertical closed membrane structured gas sensor on silicon substrate using micromachining technology for methanol detection at lower concentration. An undoped tin dioxide thin film is deposited by DC magnetron sputtering technique on a pair of gold interdigitated microelectrodes of dimension 820 µm ´ 925 µm. A meander shaped platinum micro heater of dimension 1025 µm ´ 1000 µm is incorporated to provide optimum operating temperature (about 350 0C for sensing operation. Energy dispersive X-ray spectroscopy is done to confirm the chemical composition of the sensor. Temperature coefficient of resistance of the inbuilt micro heater is found to be 0.0941 /0C. The sensor resistance shows significant change when micro heater voltage is varied from 1.5 V-3 V. I-V analysis of the sensor is carried out at 25 0C, 50 0C and 75 0C, and shifts in current through the sensor at different temperatures are observed. I-V characterization is also carried out at different methanol concentration levels (50-110 ppm and it is found that at minimum 80 ppm, the sensor exhibits promising result. The response time and recovery time of the sensor is found to be 160 s and 167 s respectively.

  9. Evaluation of bias voltage modulation sequence for nonlinear contrast agent imaging using a capacitive micromachined ultrasonic transducer array

    Science.gov (United States)

    Novell, Anthony; Legros, Mathieu; Grégoire, Jean-Marc; Dayton, Paul A.; Bouakaz, Ayache

    2014-09-01

    Many clinical diagnoses have now been improved thanks to the development of new techniques dedicated to contrast agent nonlinear imaging. Over the past few years, Capacitive Micromachined Ultrasonic Transducers (cMUTs) have emerged as a promising alternative to traditional piezoelectric transducers. One notable advantage of cMUTs is their wide frequency bandwidth. However, their use in nonlinear imaging approaches such as those used to detect contrast agents have been challenging due their intrinsic nonlinear character. We propose a new contrast imaging sequence, called bias voltage modulation (BVM), specifically developed for cMUTs to suppress their inherent nonlinear behavior. Theoretical and experimental results show that a complete cancellation of the nonlinear signal from the source can be reached when the BVM sequence is implemented. In-vitro validation of the sequence is performed using a cMUT probe connected to an open scanner and a flow phantom setup containing SonoVue microbubbles. Compared to the standard amplitude modulation imaging mode, a 6 dB increase of contrast-to-tissue ratio was achieved when the BVM sequence is applied. These results reveal that the problem of cMUT nonlinearity can be addressed, thus expanding the potential of this new transducer technology for nonlinear contrast agent detection and imaging.

  10. Evaluation of bias voltage modulation sequence for nonlinear contrast agent imaging using a capacitive micromachined ultrasonic transducer array

    International Nuclear Information System (INIS)

    Novell, Anthony; Grégoire, Jean-Marc; Bouakaz, Ayache; Legros, Mathieu; Dayton, Paul A

    2014-01-01

    Many clinical diagnoses have now been improved thanks to the development of new techniques dedicated to contrast agent nonlinear imaging. Over the past few years, Capacitive Micromachined Ultrasonic Transducers (cMUTs) have emerged as a promising alternative to traditional piezoelectric transducers. One notable advantage of cMUTs is their wide frequency bandwidth. However, their use in nonlinear imaging approaches such as those used to detect contrast agents have been challenging due their intrinsic nonlinear character. We propose a new contrast imaging sequence, called bias voltage modulation (BVM), specifically developed for cMUTs to suppress their inherent nonlinear behavior. Theoretical and experimental results show that a complete cancellation of the nonlinear signal from the source can be reached when the BVM sequence is implemented. In-vitro validation of the sequence is performed using a cMUT probe connected to an open scanner and a flow phantom setup containing SonoVue microbubbles. Compared to the standard amplitude modulation imaging mode, a 6 dB increase of contrast-to-tissue ratio was achieved when the BVM sequence is applied. These results reveal that the problem of cMUT nonlinearity can be addressed, thus expanding the potential of this new transducer technology for nonlinear contrast agent detection and imaging. (paper)

  11. Modeling and Experimental Study on Characterization of Micromachined Thermal Gas Inertial Sensors

    Directory of Open Access Journals (Sweden)

    Yan Su

    2010-09-01

    Full Text Available Micromachined thermal gas inertial sensors based on heat convection are novel devices that compared with conventional micromachined inertial sensors offer the advantages of simple structures, easy fabrication, high shock resistance and good reliability by virtue of using a gaseous medium instead of a mechanical proof mass as key moving and sensing elements. This paper presents an analytical modeling for a micromachined thermal gas gyroscope integrated with signal conditioning. A simplified spring-damping model is utilized to characterize the behavior of the sensor. The model relies on the use of the fluid mechanics and heat transfer fundamentals and is validated using experimental data obtained from a test-device and simulation. Furthermore, the nonideal issues of the sensor are addressed from both the theoretical and experimental points of view. The nonlinear behavior demonstrated in experimental measurements is analyzed based on the model. It is concluded that the sources of nonlinearity are mainly attributable to the variable stiffness of the sensor system and the structural asymmetry due to nonideal fabrication.

  12. A cellular-automata and particle-tracking simulation of abrasive jet micromachining of polymethyl-methacrylate

    International Nuclear Information System (INIS)

    Ciampini, D; Papini, M

    2011-01-01

    A cellular automaton simulation which is able to predict the geometry of micro-features etched into ductile erosive targets, as a result of abrasive jet micromachining (AJM), is presented. Similar to a previous simulation for the AJM of brittle erosive targets, the movement of individual erodent particles is tracked in a simulated environment, including their collisions with, and ricochet from, the mask and target substrate modeled as cellular-automatons. A new cell erosion algorithm is presented in order to allow the previous simulation to be applied to the AJM of ductile materials. A previously published empirical erosion rule, which related the erosion rate of ductile substrates caused by a jet, was also proven to be applicable, to a good approximation, to single particle impacts. With this new cell erosion algorithm, the predictions of the model compared well with measurements of the surface evolution of unmasked channels, masked micro-holes and micro-channels machined in polymethyl-methacrylate. The results also highlight the importance of modeling the effect of particle size on the prediction of the size and shape of features fabricated in ductile erosive materials using AJM

  13. Variable Emissivity Through MEMS Technology

    Science.gov (United States)

    Darrin, Ann Garrison; Osiander, Robert; Champion, John; Swanson, Ted; Douglas, Donya; Grob, Lisa M.; Powers, Edward I. (Technical Monitor)

    2000-01-01

    This paper discusses a new technology for variable emissivity (vari-e) radiator surfaces, which has significant advantages over traditional radiators and promises an alternative design technique for future spacecraft thermal control systems. All spacecraft rely on radiative surfaces to dissipate waste heat. These radiators have special coatings, typically with a low solar absorptivity and a high infrared-red emissivity, that are intended to optimize performance under the expected heat load and thermal sink environment. The dynamics of the heat loads and thermal environment make it a challenge to properly size the radiator and often require some means of regulating the heat rejection rate of the radiators in order to achieve proper thermal balance. Specialized thermal control coatings, which can passively or actively adjust their emissivity offer an attractive solution to these design challenges. Such systems would allow intelligent control of the rate of heat loss from a radiator in response to heat load and thermal environmental variations. Intelligent thermal control through variable emissivity systems is well suited for nano and pico spacecraft applications where large thermal fluctuations are expected due to the small thermal mass and limited electric resources. Presently there are three different types of vari-e technologies under development: Micro ElectroMechanical Systems (MEMS) louvers, Electrochromic devices, and Electrophoretic devices. This paper will describe several prototypes of micromachined (MEMS) louvers and experimental results for the emissivity variations measured on theses prototypes. It will further discuss possible actuation mechanisms and space reliability aspects for different designs. Finally, for comparison parametric evaluations of the thermal performances of the new vari-e technology and standard thermal control systems are presented in this paper.

  14. Surface-Enhanced Raman Scattering-Based Immunoassay Technologies for Detection of Disease Biomarkers

    Directory of Open Access Journals (Sweden)

    Joseph Smolsky

    2017-01-01

    Full Text Available Detection of biomarkers is of vital importance in disease detection, management, and monitoring of therapeutic efficacy. Extensive efforts have been devoted to the development of novel diagnostic methods that detect and quantify biomarkers with higher sensitivity and reliability, contributing to better disease diagnosis and prognosis. When it comes to such devastating diseases as cancer, these novel powerful methods allow for disease staging as well as detection of cancer at very early stages. Over the past decade, there have been some advances in the development of platforms for biomarker detection of diseases. The main focus has recently shifted to the development of simple and reliable diagnostic tests that are inexpensive, accurate, and can follow a patient’s disease progression and therapy response. The individualized approach in biomarker detection has been also emphasized with detection of multiple biomarkers in body fluids such as blood and urine. This review article covers the developments in Surface-Enhanced Raman Scattering (SERS and related technologies with the primary focus on immunoassays. Limitations and advantages of the SERS-based immunoassay platform are discussed. The article thoroughly describes all components of the SERS immunoassay and highlights the superior capabilities of SERS readout strategy such as high sensitivity and simultaneous detection of a multitude of biomarkers. Finally, it introduces recently developed strategies for in vivo biomarker detection using SERS.

  15. Evaluation of Surface Cleaning Procedures for CTGS Substrates for SAW Technology with XPS

    Directory of Open Access Journals (Sweden)

    Erik Brachmann

    2017-11-01

    Full Text Available A highly efficient and reproducible cleaning procedure of piezoelectric substrates is essential in surface acoustic waves (SAW technology to fabricate high-quality SAW devices, especially for new applications such SAW sensors wherein new materials for piezoelectric substrates and interdigital transducers are used. Therefore, the development and critical evaluation of cleaning procedures for each material system that is under consideration becomes crucial. Contaminants like particles or the presence of organic/inorganic material on the substrate can dramatically influence and alter the properties of the thin film substrate composite, such as wettability, film adhesion, film texture, and so on. In this article, focus is given to different cleaning processes like SC-1 and SC-2, UV-ozone treatment, as well as cleaning by first-contact polymer Opticlean, which are applied for removal of contaminants from the piezoelectric substrate Ca 3 TaGa 3 Si 2 O 14 . By means of X-ray photoelectron spectroscopy, the presence of the most critical contaminants such as carbon, sodium, and iron removed through different cleaning procedures were studied and significant differences were observed between the outcomes of these procedures. Based on these results, a two-step cleaning process, combining SC-1 at a reduced temperature at 30 ∘ C instead of 80 ∘ C and a subsequent UV-ozone cleaning directly prior to deposition of the metallization, is suggested to achieve the lowest residual contamination level.

  16. Bayesian Estimation of the Active Concentration and Affinity Constants Using Surface Plasmon Resonance Technology.

    Directory of Open Access Journals (Sweden)

    Feng Feng

    Full Text Available Surface plasmon resonance (SPR has previously been employed to measure the active concentration of analyte in addition to the kinetic rate constants in molecular binding reactions. Those approaches, however, have a few restrictions. In this work, a Bayesian approach is developed to determine both active concentration and affinity constants using SPR technology. With the appropriate prior probabilities on the parameters and a derived likelihood function, a Markov Chain Monte Carlo (MCMC algorithm is applied to compute the posterior probability densities of both the active concentration and kinetic rate constants based on the collected SPR data. Compared with previous approaches, ours exploits information from the duration of the process in its entirety, including both association and dissociation phases, under partial mass transport conditions; do not depend on calibration data; multiple injections of analyte at varying flow rates are not necessary. Finally the method is validated by analyzing both simulated and experimental datasets. A software package implementing our approach is developed with a user-friendly interface and made freely available.

  17. Fission Surface Power Systems (FSPS) Project Final Report for the Exploration Technology Development Program (ETDP): Fission Surface Power, Transition Face to Face

    Science.gov (United States)

    Palac, Donald T.

    2011-01-01

    The Fission Surface Power Systems Project became part of the ETDP on October 1, 2008. Its goal was to demonstrate fission power system technology readiness in an operationally relevant environment, while providing data on fission system characteristics pertinent to the use of a fission power system on planetary surfaces. During fiscal years 08 to 10, the FSPS project activities were dominated by hardware demonstrations of component technologies, to verify their readiness for inclusion in the fission surface power system. These Pathfinders demonstrated multi-kWe Stirling power conversion operating with heat delivered via liquid metal NaK, composite Ti/H2O heat pipe radiator panel operations at 400 K input water temperature, no-moving-part electromagnetic liquid metal pump operation with NaK at flight-like temperatures, and subscale performance of an electric resistance reactor simulator capable of reproducing characteristics of a nuclear reactor for the purpose of system-level testing, and a longer list of component technologies included in the attached report. Based on the successful conclusion of Pathfinder testing, work began in 2010 on design and development of the Technology Demonstration Unit (TDU), a full-scale 1/4 power system-level non-nuclear assembly of a reactor simulator, power conversion, heat rejection, instrumentation and controls, and power management and distribution. The TDU will be developed and fabricated during fiscal years 11 and 12, culminating in initial testing with water cooling replacing the heat rejection system in 2012, and complete testing of the full TDU by the end of 2014. Due to its importance for Mars exploration, potential applicability to missions preceding Mars missions, and readiness for an early system-level demonstration, the Enabling Technology Development and Demonstration program is currently planning to continue the project as the Fission Power Systems project, including emphasis on the TDU completion and testing.

  18. Proceedings of national executive management seminar on surface finishing by radiation curing technology: radiation curing for better finishing

    International Nuclear Information System (INIS)

    1993-01-01

    This book compiled the paper presented at this seminar. The papers discussed are 1. Incentives for investment in the manufacturing sector (in Malaysia) 2.Trends and prospect of surface finishing by radiation curing technology in Malaysia 3. Industrial application of radiation curing

  19. Design and Analysis of a Micromechanical Three-Component Force Sensor for Characterizing and Quantifying Surface Roughness

    Directory of Open Access Journals (Sweden)

    Liang Q.

    2015-10-01

    Full Text Available Roughness, which can represent the trade-off between manufacturing cost and performance of mechanical components, is a critical predictor of cracks, corrosion and fatigue damage. In order to measure polished or super-finished surfaces, a novel touch probe based on three-component force sensor for characterizing and quantifying surface roughness is proposed by using silicon micromachining technology. The sensor design is based on a cross-beam structure, which ensures that the system possesses high sensitivity and low coupling. The results show that the proposed sensor possesses high sensitivity, low coupling error, and temperature compensation function. The proposed system can be used to investigate micromechanical structures with nanometer accuracy.

  20. Surface Improvement Technology “Wonder Process Craft (WPC)” by Rapid Impact of Fine Particle

    Science.gov (United States)

    Miyasaka, Yoshio

    Based on our sandblast and shot peening technology, we have found that utilizing relatively smaller powder for sandblasting enables the modification or the organizational and mechanical features of the ingredient's surface, defying the conventional thought in this subject manner. The technology mentioned previously can be utilized on various ingredients and machinery parts, and its effect is widely recognized. By blasting titanium particles onto the surface of metals, ceramics, or combined substances utilizing the previously mentioned technology, it is possible to attain a thin film layer of titanium deposit that is effective in catalyzing light. This is PIP (Powder Impact Plating) natural catalyst. In today's world where environmental destruction has become a serious issue, we hope to contribute to the improvement of the environment with our highly efficient catalyst.

  1. Investigate the complex process in particle-fluid based surface generation technology using reactive molecular dynamics method

    Science.gov (United States)

    Han, Xuesong; Li, Haiyan; Zhao, Fu

    2017-07-01

    Particle-fluid based surface generation process has already become one of the most important materials processing technology for many advanced materials such as optical crystal, ceramics and so on. Most of the particle-fluid based surface generation technology involves two key process: chemical reaction which is responsible for surface softening; physical behavior which is responsible for materials removal/deformation. Presently, researchers cannot give a reasonable explanation about the complex process in the particle-fluid based surface generation technology because of the small temporal-spatial scale and the concurrent influence of physical-chemical process. Molecular dynamics (MD) method has already been proved to be a promising approach for constructing effective model of atomic scale phenomenon and can serve as a predicting simulation tool in analyzing the complex surface generation mechanism and is employed in this research to study the essence of surface generation. The deformation and piles of water molecule is induced with the feeding of abrasive particle which justifies the property mutation of water at nanometer scale. There are little silica molecule aggregation or materials removal because the water-layer greatly reduce the strength of mechanical interaction between particle and materials surface and minimize the stress concentration. Furthermore, chemical effect is also observed at the interface: stable chemical bond is generated between water and silica which lead to the formation of silconl and the reaction rate changes with the amount of water molecules in the local environment. Novel ring structure is observed in the silica surface and it is justified to be favored of chemical reaction with water molecule. The siloxane bond formation process quickly strengthened across the interface with the feeding of abrasive particle because of the compressive stress resulted by the impacting behavior.

  2. Investigate the complex process in particle-fluid based surface generation technology using reactive molecular dynamics method

    Directory of Open Access Journals (Sweden)

    Xuesong Han

    2017-07-01

    Full Text Available Particle-fluid based surface generation process has already become one of the most important materials processing technology for many advanced materials such as optical crystal, ceramics and so on. Most of the particle-fluid based surface generation technology involves two key process: chemical reaction which is responsible for surface softening; physical behavior which is responsible for materials removal/deformation. Presently, researchers cannot give a reasonable explanation about the complex process in the particle-fluid based surface generation technology because of the small temporal-spatial scale and the concurrent influence of physical-chemical process. Molecular dynamics (MD method has already been proved to be a promising approach for constructing effective model of atomic scale phenomenon and can serve as a predicting simulation tool in analyzing the complex surface generation mechanism and is employed in this research to study the essence of surface generation. The deformation and piles of water molecule is induced with the feeding of abrasive particle which justifies the property mutation of water at nanometer scale. There are little silica molecule aggregation or materials removal because the water-layer greatly reduce the strength of mechanical interaction between particle and materials surface and minimize the stress concentration. Furthermore, chemical effect is also observed at the interface: stable chemical bond is generated between water and silica which lead to the formation of silconl and the reaction rate changes with the amount of water molecules in the local environment. Novel ring structure is observed in the silica surface and it is justified to be favored of chemical reaction with water molecule. The siloxane bond formation process quickly strengthened across the interface with the feeding of abrasive particle because of the compressive stress resulted by the impacting behavior.

  3. Coal surface control for advanced physical fine coal cleaning technologies. Final report, September 19, 1988--August 31, 1992

    Energy Technology Data Exchange (ETDEWEB)

    Morsi, B.I.; Chiang, S.H.; Sharkey, A.; Blachere, J.; Klinzing, G.; Araujo, G.; Cheng, Y.S.; Gray, R.; Streeter, R.; Bi, H.; Campbell, P.; Chiarlli, P.; Ciocco, M.; Hittle, L.; Kim, S.; Kim, Y.; Perez, L.; Venkatadri, R.

    1992-12-31

    This final report presents the research work carried out on the Coal Surface Control for Advanced Physical Fine Coal Cleaning Technologies project, sponsored by the US Department of Energy, Pittsburgh Energy Technology Center (DOE/PETC). The project was to support the engineering development of the selective agglomeration technology in order to reduce the sulfur content of US coals for controlling SO{sub 2} emissions (i.e., acid rain precursors). The overall effort was a part of the DOE/PETCs Acid Rain Control Initiative (ARCI). The overall objective of the project is to develop techniques for coal surface control prior to the advanced physical fine coal cleaning process of selective agglomeration in order to achieve 85% pyrite sulfur rejection at an energy recovery greater than 85% based on run-of-mine coal. The surface control is meant to encompass surface modification during grinding and laboratory beneficiation testing. The project includes the following tasks: Project planning; methods for analysis of samples; development of standard beneficiation test; grinding studies; modification of particle surface; and exploratory R&D and support. The coal samples used in this project include three base coals, Upper Freeport - Indiana County, PA, Pittsburgh NO. 8 - Belmont County, OH, and Illinois No. 6 - Randolph County, IL, and three additional coals, Upper Freeport - Grant County- WV, Kentucky No. 9 Hopkins County, KY, and Wyodak - Campbell County, WY. A total of 149 drums of coal were received.

  4. Machining the Integral Impeller and Blisk of Aero-Engines: A Review of Surface Finishing and Strengthening Technologies

    Science.gov (United States)

    Fu, Youzhi; Gao, Hang; Wang, Xuanping; Guo, Dongming

    2017-05-01

    The integral impeller and blisk of an aero-engine are high performance parts with complex structure and made of difficult-to-cut materials. The blade surfaces of the integral impeller and blisk are functional surfaces for power transmission, and their surface integrity has significant effects on the aerodynamic efficiency and service life of an aero-engine. Thus, it is indispensable to finish and strengthen the blades before use. This paper presents a comprehensive literature review of studies on finishing and strengthening technologies for the impeller and blisk of aero-engines. The review includes independent and integrated finishing and strengthening technologies and discusses advanced rotational abrasive flow machining with back-pressure used for finishing the integral impeller and blisk. A brief assessment of future research problems and directions is also presented.

  5. Touch mode micromachined capacitive pressure sensor with signal conditioning electronics

    DEFF Research Database (Denmark)

    Fragiacomo, Giulio; Eriksen, Gert F.; Christensen, Carsten

    2010-01-01

    technology to design and fabricate these sensors has been implemented. Capacitive pressure sensing, on the other hand, is still an open and really promising field. Results Capacitive microsensors were designed and fabricated (Fig. 1) and an analytical model for touch mode regime, which fitted accurately...

  6. Development of a gas microvalve based on fine and micromachining

    NARCIS (Netherlands)

    Fazal, I.

    2007-01-01

    The work presented in this thesis is generated in the frame of the project “Micro and Miniaturized Flow Controller for Gas Chromatography�? financially supported by the Dutch Technology Foundation (STW). The aim of the project is to develop a miniature instrument for the control of gas flow

  7. Backtracking drifting objects using surface currents from high-frequency (HF) radar technology

    Science.gov (United States)

    Abascal, Ana Julia; Castanedo, Sonia; Fernández, Vicente; Medina, Raúl

    2012-07-01

    In this work, the benefits of high-frequency (HF) radar ocean observation technology for backtracking drifting objects are analysed. The HF radar performance is evaluated by comparison of trajectories between drifter buoys versus numerical simulations using a Lagrangian trajectory model. High-resolution currents measured by a coastal HF radar network combined with atmospheric fields provided by numerical models are used to backtrack the trajectory of two dataset of surface-drifting buoys: group I (with drogue) and group II (without drogue). A methodology based on optimization methods is applied to estimate the uncertainty in the trajectory simulations and to optimize the search area of the backtracked positions. The results show that, to backtrack the trajectory of the buoys in group II, both currents and wind fields were required. However, wind fields could be practically discarded when simulating the trajectories of group I. In this case, the optimal backtracked trajectories were obtained using only HF radar currents as forcing. Based on the radar availability data, two periods ranging between 8 and 10 h were selected to backtrack the buoy trajectories. The root mean squared error (RMSE) was found to be 1.01 km for group I and 0.82 km for group II. Taking into account these values, a search area was calculated using circles of RMSE radii, obtaining 3.2 and 2.11 km2 for groups I and II, respectively. These results show the positive contribution of HF radar currents for backtracking drifting objects and demonstrate that these data combined with atmospheric models are of value to perform backtracking analysis of drifting objects.

  8. A Comparison between Microfabrication Technologies for Metal Tooling

    DEFF Research Database (Denmark)

    Uriarte, L.; Ivanov, A.; Oosterling, H

    2005-01-01

    of metal. The following technologies have been analysed: micromilling, microEDM (microelectro discharge machining, including wire-EDM, sinking-EDM and EDM-milling), laser micromachining, electroforming and ECF (an innovative process proposed by HSG-IMAT). Considered materials are nickel for electroforming...

  9. [Optimization of flash-type extraction technology of alisol B 23-acetate from Alismatis Rhizoma by response surface methodology].

    Science.gov (United States)

    Wei, Ying-Chun; Yan, Ming; Yang, Jing; Liu, Jun-Chao; Yin, Hong-Mei; Wu, Yun; Sun, Yong-Cheng; Xiao, Wei

    2016-02-01

    Response surface methodology was used to optimize and obtain the optimal flash-type extraction technology of alisol B 23-acetate from Alismatis Rhizoma. With the extraction rate of alisol B 23-acetate as an indicator, single-factor test was used to investigate the effect of ethanol volume fraction, liquid-solid ratio, extraction times and extracting time on the extraction rate of alisol B 23-acetate.The results were combined with Box-Benhnken design and response surface analysis to optimize the technology parameters for extraction process of Alismatis Rhizoma and obtain the optimal flash-type extraction technology under the following conditions: ethanol volume fraction 80%, liquid-solid ratio 12∶1, extraction 4 times, 114 s/time. Flash-type extraction technology of alisol B 23-acetate by response surface methodology is stable, time-saving, efficient, and with the advantages of room temperature extraction and no component damage, so it can be used for massive production. Copyright© by the Chinese Pharmaceutical Association.

  10. A Brief Survey of Media Access Control, Data Link Layer, and Protocol Technologies for Lunar Surface Communications

    Science.gov (United States)

    Wallett, Thomas M.

    2009-01-01

    This paper surveys and describes some of the existing media access control and data link layer technologies for possible application in lunar surface communications and the advanced wideband Direct Sequence Code Division Multiple Access (DSCDMA) conceptual systems utilizing phased-array technology that will evolve in the next decade. Time Domain Multiple Access (TDMA) and Code Division Multiple Access (CDMA) are standard Media Access Control (MAC) techniques that can be incorporated into lunar surface communications architectures. Another novel hybrid technique that is recently being developed for use with smart antenna technology combines the advantages of CDMA with those of TDMA. The relatively new and sundry wireless LAN data link layer protocols that are continually under development offer distinct advantages for lunar surface applications over the legacy protocols which are not wireless. Also several communication transport and routing protocols can be chosen with characteristics commensurate with smart antenna systems to provide spacecraft communications for links exhibiting high capacity on the surface of the Moon. The proper choices depend on the specific communication requirements.

  11. Development of Advanced Surface Enhancement Technology for Decreasing Wear and Corrosion of Equipment Used for Mineral Processing

    Energy Technology Data Exchange (ETDEWEB)

    Daniel Tao; R. Honaker; B. K. Parekh

    2007-09-20

    Equipment wear is a major concern in the mineral processing industry, which dramatically increases the maintenance cost and adversely affects plant operation efficiency. In this research, novel surface treatment technologies, High Density Infrared (HDI) and Laser Surface Engineering (LSE) surface coating processes were developed for the surface enhancement of selected mineral and coal processing equipment. Microstructural and mechanical properties of the coated specimens were characterized. Laboratory-simulated wear tests were conducted to evaluate the tribological performance of the coated components. Test results indicate that the wear resistance of ASTM A36 (raw coal screen section) and can be significantly increased by applying HDI and LSE coating processes. Field testing has been performed using a LSE-treated screen panel and it showed a significant improvement of the service life.

  12. Development of Advanced Surface Enhancement Technology for Decreasing Wear and Corrosion of Equipment Used for Mineral Processing

    Energy Technology Data Exchange (ETDEWEB)

    Daniel Tao; Craig A. Blue

    2006-07-20

    Equipment wear is a major concern in the mineral processing industry, which dramatically increases the maintenance cost and adversely affects plant operation efficiency. In this research, novel surface treatment technologies, High Density Infrared (HDI) and Laser Surface Engineering (LSE) surface coating processes were developed for the surface enhancement of selected mineral processing equipment. Microstructural and mechanical properties of the coated specimens were characterized. Laboratory-simulated wear tests were conducted to evaluate the tribological performance of the coated components. Test results indicate that the wear resistance of ASTM A36 (raw coal screen section) and can be significantly increased by applying HDI and LSE coating processes. Field testing has been performed using a LSE-treated screen panel and it showed a 2 times improvement of the service life.

  13. Analysis of the surface technology of silicon detectors for imaging of low-energy beta tracers in biological material

    CERN Document Server

    Tykva, R

    2000-01-01

    Using silicon surface barrier detectors, the counting sensitivity of low-energy beta tracers is considerably influenced by surface technology applied in detector manufacturing. Original diagnostic procedure, using a mixture of uranium fission products, is described to trace the behaviors of different admixtures as in the etching bath as in the water used during development of the detector surface. In combination with some other described analyses, the detectors produced with the developed surface control are used in a PC - controlled scanning equipment reaching at room temperature an FWHM of 3.4 keV for sup 2 sup 4 sup 1 Am. Such detectors make it possible to image distribution, of e.g., sup 3 H, sup 1 sup 2 sup 5 I, sup 3 H+ sup 1 sup 4 C and other beta tracer combinations applied in life and environmental sciences.

  14. AISI/DOE Technology Roadmap Program: Improved Surface Quality of Exposed Automotive Sheet Steels

    Energy Technology Data Exchange (ETDEWEB)

    John G. Speer; David K. Matlock; Noel Meyers; Young-Min Choi

    2002-10-10

    Surface quality of sheet steels is an important economic and technical issue for applications such as critical automotive surfaces. This project was therefore initiated to develop a more quantitative methodology for measuring surface imperfections, and to assess their response to forming and painting, particularly with respect to their visibility or invisibility after painting. The objectives were met, and included evaluation of a variety of imperfections present on commercial sheet surfaces or simulated using methods developed in the laboratory. The results are expected to have significant implications with respect to the methodology for assessing surface imperfections, development of quantitative criteria for surface inspection, and understanding and improving key painting process characteristics that influence the perceived quality of sheet steel surfaces.

  15. Picosecond and nanosecond pulse delivery through a hollow-core Negative Curvature Fiber for micro-machining applications.

    Science.gov (United States)

    Jaworski, Piotr; Yu, Fei; Maier, Robert R J; Wadsworth, William J; Knight, Jonathan C; Shephard, Jonathan D; Hand, Duncan P

    2013-09-23

    We present high average power picosecond and nanosecond pulse delivery at 1030 nm and 1064 nm wavelengths respectively through a novel hollow-core Negative Curvature Fiber (NCF) for high-precision micro-machining applications. Picosecond pulses with an average power above 36 W and energies of 92 µJ, corresponding to a peak power density of 1.5 TWcm⁻² have been transmitted through the fiber without introducing any damage to the input and output fiber end-faces. High-energy nanosecond pulses (>1 mJ), which are ideal for micro-machining have been successfully delivered through the NCF with a coupling efficiency of 92%. Picosecond and nanosecond pulse delivery have been demonstrated in fiber-based laser micro-machining of fused silica, aluminum and titanium.

  16. Spacecraft charging investigation for the CTS project. [electric insulator surface tests by electron bombardment for Communications Technology Satellite

    Science.gov (United States)

    Stevens, N. J.; Lovell, R. R.; Gore, V.

    1975-01-01

    Results to date are presented for a program of analytical and experimental investigations to assess the impact of discharge pulses from spacecraft surfaces in the joint Canadian-American Communications Technology Satellite (CTS). All insulator surfaces tested experienced visible discharges when subjected to an electron beam with energy greater than 10 keV. Discharge rate was found to be a function of current flux. The deployable solar array sample experienced discharges under bombardment from the cell or kapton side. There was no measurable cell performance degradation due to the discharges.

  17. Surface Modification Technology of ODS Alloying Treatment by using Laser Heat Source

    International Nuclear Information System (INIS)

    Kim, H. G.; Kim, I. H.; Choi, B. K.; Park, J. Y.; Koo, Y. H.

    2012-01-01

    The ODS (Oxide Dispersion Strengthed) alloys can be applied as structural materials for components in the core of a nuclear power plants since these components must have a high mechanical strength at high temperature up to 700 .deg. C. This type of alloy was generally manufactured by mechanical alloying from its source metal and Y 2 O 3 powders. The mechanical alloyed powder is subjected to the HIP (Hot Isotatic Pressing) or hot extrusion: and this product is heat treated at target temperature and time. Thus, the Y 2 O 3 particles are dispersed in the metal matrix. These manufacturing process of ODS alloy is very complex and expensive. Also, it is necessary the special techniques to obtain the uniform dispersion and volume control of Y 2 O 3 particles. Another problem is the final product forming such as tube and sheet because the intermediated-product has a high mechanical strength due to the dispersion of Y 2 O 3 particles. The laser cladding techniques was applied on the surface cladding of ceramics and inter-metallic compounds on metal base and ceramic base components to increase corrosion and wear resistance. The laser heat source can be used to the alloying the metal and ceramic materials, because thermally melting of metal and ceramic is possible. So, we are applied on ODS alloy manufacturing by using the laser heat source. The main advantages and disadvantage of this technology can be resumed as follows: · It is possible to apply to the sheet and tube shape component, directly. · Metallurgical damage such as HAZ and severe grain growth is considerably reduced. · Good control of the alloying element of the treated zone · Highly reproducible homogeneous zone · The pores and cracks are suppressed in the treated zone · Oxidation can be prevented during the process. · Good control is possible for the irregular shaped components. · The bulk material alloying is limited by the power of laser source. So, this work is studied on the ODS alloy manufacturing

  18. Arrayed architectures for multi-stage Si-micromachined high-flow Knudsen pumps

    International Nuclear Information System (INIS)

    Qin, Yutao; An, Seungdo; Gianchandani, Yogesh B

    2015-01-01

    This paper reports an evaluation and a comparison of two architectures for implementing Si-micromachined high-flow Knudsen pumps. Knudsen pumps, which operate on the principle of thermal transpiration, have been shown to have great promise for micro-scale gas phase fluidic systems such as micro gas chromatographs. Simultaneously achieving both a high flow rate and adequate blocking pressure has been a persistent challenge, which is addressed in this work by combining multiple pumps in series and addressing the resulting challenges in thermal management. The basic building block is a Si-micromachined pump with  ≈100 000 parallel channels in a 4 mm  ×  6 mm footprint. In the primary approach, multiple pump stages are stacked vertically with interleaved Si-micromachined spacers. A stacked 4-stage Knudsen pump has a form factor of 10 mm  ×  8 mm  ×  6 mm. In an alternate approach, multiple stages are arranged in a planar array. The experimental results demonstrate multiplication of the output pressure head with the number of stages, while the flow rate is maintained. For example, a stacked 4-stage Knudsen pump with 8 W power operated at atmospheric pressure provided a blocking pressure of 0.255 kPa, which was 3.6  ×  of that provided by a single-stage pump with 2 W power; while both provided a  ≈  30 sccm maximum flow rate. The performance can be customized for practical applications such as micro gas chromatography. (paper)

  19. A Comparative Analysis of Strategic Approaches for Information Technology (IT) Management for Commander Naval Surface Forces

    Science.gov (United States)

    2010-03-01

    Nick Mutt , n.d.). Perhaps one of the biggest disadvantages to this technology is the cost, particularly the large dollar investments for setup...Business Process Modeling, SOA, and Infrastructure Technology. Boca Raton, FL: Auerbach Publications. Mutt , Nick . Disadvantages of ERP. (n.d

  20. Femtosecond laser 3D micromachining for microfluidic and optofluidic applications

    CERN Document Server

    Sugioka, Koji

    2013-01-01

    Femtosecond lasers opened up new avenue in materials processing due to its unique features of ultrashort pulse width and extremely high peak intensity. One of the most important features of femtosecond laser processing is that strong absorption can be induced even by materials which are transparent to the femtosecond laser beam due to nonlinear multiphoton absorption. The multiphoton absorption allows us to perform not only surface but also three-dimensionally internal microfabrication of transparent materials such as glass. This capability makes it possible to directly fabricate three-dimensi

  1. A versatile multi-user polyimide surface micromachinning process for MEMS applications

    KAUST Repository

    Carreno, Armando Arpys Arevalo

    2015-04-01

    This paper reports a versatile multi-user micro-fabrication process for MEMS devices, the \\'Polyimide MEMS Multi-User Process\\' (PiMMPs). The reported process uses polyimide as the structural material and three separate metallization layers that can be interconnected depending on the desired application. This process enables for the first time the development of out-of-plane compliant mechanisms that can be designed using six different physical principles for actuation and sensing on a wafer from a single fabrication run. These principles are electrostatic motion, thermal bimorph actuation, capacitive sensing, magnetic sensing, thermocouple-based sensing and radio frequency transmission and reception. © 2015 IEEE.

  2. Fabrication method of low f-number microlens arrays by using surface coating and epoxy dispensing technology

    Science.gov (United States)

    Li, Pei; Pei, Jing; Pan, Long-fa; Zappe, Hans

    2014-04-01

    We describe a fabrication method for arrays of microlenses of low f-number by using a surface coating and dispensing technology. We demonstrate how to achieve a low f-number by selectively changing the surface wettability, as well as how to precisely control the f-number through control of the dispensing time. This advance enables the fabrication of arrays of microlenses with diameters varying from 400 to 1400 μm, f-number as low as 0.95. In addition, the optical performance tests indicate that this method is suitable for high performance microlens array fabrication. This dispensing technology may be low cost and allow fast fabrication of high-speed microlens arrays, and may thus be particularly useful for biologically inspired advanced optical systems.

  3. Femtosecond laser micromachining of compound parabolic concentrator fiber tipped glucose sensors

    DEFF Research Database (Denmark)

    Hassan, Hafeez Ul; Lacraz, Amédée; Kalli, Kyriacos

    2017-01-01

    We report on highly accurate femtosecond (fs) laser micromachining of a compound parabolic concentrator (CPC) fiber tip on a polymer optical fiber (POF). The accuracy is reflected in an unprecedented correspondence between the numerically predicted and experimentally found improvement in fluoresc.......5, which is only 11.6% from the predicted value. Earlier state-of-the-art fabrication of the CPC-shaped tip by fiber tapering was of so poor quality that the actual improvement was 43% lower than the predicted improvement of the ideal CPC shape....

  4. Wideband acoustic activation and detection of droplet vaporization events using a capacitive micromachined ultrasonic transducer

    Science.gov (United States)

    Novell, Anthony; Arena, Christopher B.; Oralkan, Omer; Dayton, Paul A.

    2016-01-01

    An ongoing challenge exists in understanding and optimizing the acoustic droplet vaporization (ADV) process to enhance contrast agent effectiveness for biomedical applications. Acoustic signatures from vaporization events can be identified and differentiated from microbubble or tissue signals based on their frequency content. The present study exploited the wide bandwidth of a 128-element capacitive micromachined ultrasonic transducer (CMUT) array for activation (8 MHz) and real-time imaging (1 MHz) of ADV events from droplets circulating in a tube. Compared to a commercial piezoelectric probe, the CMUT array provides a substantial increase of the contrast-to-noise ratio. PMID:27369143

  5. Non-Lithographic Silicon Micromachining Using Inkjet and Chemical Etching

    Directory of Open Access Journals (Sweden)

    Sasha Hoshian

    2016-12-01

    Full Text Available We introduce a non-lithographical and vacuum-free method to pattern silicon. The method combines inkjet printing and metal assisted chemical etching (MaCE; we call this method “INKMAC”. A commercial silver ink is printed on top of a silicon surface to create the catalytic patterns for MaCE. The MaCE process leaves behind a set of silicon nanowires in the shape of the inkjet printed micrometer scale pattern. We further show how a potassium hydroxide (KOH wet etching process can be used to rapidly etch away the nanowires, producing fully opened cavities and channels in the shape of the original printed pattern. We show how the printed lines (width 50–100 µm can be etched into functional silicon microfluidic channels with different depths (10–40 µm with aspect ratios close to one. We also used individual droplets (minimum diameter 30 µm to produce cavities with a depth of 60 µm and an aspect ratio of two. Further, we discuss using the structured silicon substrate as a template for polymer replication to produce superhydrophobic surfaces.

  6. Nickel silicide thin films as masking and structural layers for silicon bulk micro-machining by potassium hydroxide wet etching

    International Nuclear Information System (INIS)

    Bhaskaran, M; Sriram, S; Sim, L W

    2008-01-01

    This paper studies the feasibility of using titanium and nickel silicide thin films as mask materials for silicon bulk micro-machining. Thin films of nickel silicide were found to be more resistant to wet etching in potassium hydroxide. The use of nickel silicide as a structural material, by fabricating micro-beams of varying dimensions, is demonstrated. The micro-structures were realized using these thin films with wet etching using potassium hydroxide solution on (1 0 0) and (1 1 0) silicon substrates. These results show that nickel silicide is a suitable alternative to silicon nitride for silicon bulk micro-machining

  7. Numerical modelling of micro-machining of f.c.c. single crystal: Influence of strain gradients

    KAUST Repository

    Demiral, Murat

    2014-11-01

    A micro-machining process becomes increasingly important with the continuous miniaturization of components used in various fields from military to civilian applications. To characterise underlying micromechanics, a 3D finite-element model of orthogonal micro-machining of f.c.c. single crystal copper was developed. The model was implemented in a commercial software ABAQUS/Explicit employing a user-defined subroutine VUMAT. Strain-gradient crystal-plasticity and conventional crystal-plasticity theories were used to demonstrate the influence of pre-existing and evolved strain gradients on the cutting process for different combinations of crystal orientations and cutting directions. Crown Copyright © 2014.

  8. Development of micromachining technology in ion microbeam system at TIARA, JAEA

    International Nuclear Information System (INIS)

    Kamiya, T.; Nishikawa, H.; Satoh, T.; Haga, J.; Oikawa, M.; Ishii, Y.; Ohkubo, T.; Uchiya, N.; Furuta, Y.

    2009-01-01

    An ion-beam-lithography technique has been progressed in the microbeam systems at Japan Atomic Energy Agency (JAEA) Takasaki. In order to obtain a high-precision measure for microbeam size estimation with a high precision, we applied this technique combined with the electroplating process to make a Ni relief pattern as a resolution standard used in secondary electron imaging. As a result, the smallest beam size could be recorded. The scattering of ions in the materials influenced the spatial resolution and this is also discussed

  9. A 850 GHz SIS receiver employing silicon micro-machining technology

    Science.gov (United States)

    Kooi, J. W.; Pety, J.; Schaffer, P. L.; Phillips, T. G.; Bumble, B.; LeDuc, H. G.; Walker, C. K.

    1996-01-01

    A 850 GHz superconductor-insulator-superconductor (SIS) heterodyne receiver which uses a radiofrequency tuned niobium tunnel junction fabricated on a 1 micron thick silicon nitrate membrane, is reported. From video and heterodyne measurements, it was calculated that the niobium film loss in the radiofrequency matching network is about 6.8 dB at 822 GHz. These results are approximately a factor of two higher than the theoretical loss predicted by the Mattis-Bardeen theory in the extreme anomalous limit. The junction design and the receiver configuration are described, including the mixer block, the membrane construction and the cooled optics. The performance tests using a Fourier transform spectrometer to measure the response of the radiofrequency matching network, and the SIS simulations of the receiver response to cold and hot loads, the infrared noise contribution and the overall mixer conversion efficiency, are reported. It is concluded that the receiver response is limited by the absorption loss in the radiofrequency matching network.

  10. Erosion resistant anti-ice surfaces generated by ultra short laser pulses

    NARCIS (Netherlands)

    Del Cerro, D.A.; Römer, G.R.B.E.; Huis in't Veld, A.J.

    2010-01-01

    Wetting properties of a wide range of materials can be modified by accurate laser micromachining with ultra short laser pulses. Controlling the surface topography in a micro and sub-micrometer scale allows the generation of water-repellent surfaces, which remain dry and prevent ice accumulation

  11. Development of Advanced Surface Enhancement Technology for Decreasing Wear and Corrosion of Equipment Used for Mineral Processing

    Energy Technology Data Exchange (ETDEWEB)

    Daniel Tao; Craig A. Blue

    2004-08-01

    Equipment wear is a major concern in the mineral processing industry, which dramatically increases the maintenance cost and adversely affects plant operation efficiency. In this research, wear problems of mineral processing equipment including screens, sieve bends, heavy media vessel, dewatering centrifuge, etc., were identified. A novel surface treatment technology, high density infrared (HDI) surface coating process was proposed for the surface enhancement of selected mineral processing equipment. Microstructural and mechanical properties of the coated samples were characterized. Laboratory-simulated wear tests were conducted to evaluate the tribological performance of the coated components. Test results indicate that the wear resistance of AISI 4140 and ASTM A36 steels can be increased 3 and 5 folds, respectively by the application of HDI coatings.

  12. Micromachined Chip Scale Thermal Sensor for Thermal Imaging.

    Science.gov (United States)

    Shekhawat, Gajendra S; Ramachandran, Srinivasan; Jiryaei Sharahi, Hossein; Sarkar, Souravi; Hujsak, Karl; Li, Yuan; Hagglund, Karl; Kim, Seonghwan; Aden, Gary; Chand, Ami; Dravid, Vinayak P

    2018-02-27

    The lateral resolution of scanning thermal microscopy (SThM) has hitherto never approached that of mainstream atomic force microscopy, mainly due to poor performance of the thermal sensor. Herein, we report a nanomechanical system-based thermal sensor (thermocouple) that enables high lateral resolution that is often required in nanoscale thermal characterization in a wide range of applications. This thermocouple-based probe technology delivers excellent lateral resolution (∼20 nm), extended high-temperature measurements >700 °C without cantilever bending, and thermal sensitivity (∼0.04 °C). The origin of significantly improved figures-of-merit lies in the probe design that consists of a hollow silicon tip integrated with a vertically oriented thermocouple sensor at the apex (low thermal mass) which interacts with the sample through a metallic nanowire (50 nm diameter), thereby achieving high lateral resolution. The efficacy of this approach to SThM is demonstrated by imaging embedded metallic nanostructures in silica core-shell, metal nanostructures coated with polymer films, and metal-polymer interconnect structures. The nanoscale pitch and extremely small thermal mass of the probe promise significant improvements over existing methods and wide range of applications in several fields including semiconductor industry, biomedical imaging, and data storage.

  13. Strengthening of the nuclear valve sealing surface by laser cladding technology

    International Nuclear Information System (INIS)

    Shi Shihong; Huang Guodong

    1998-07-01

    A 5 kW laser with CO 2 flow transverse for cladding Co-base alloy or Ni-base alloy coat on the austenite matrix of the nuclear valve sealing surface is introduced. The results show that, after the sealing surface of valve is processed by the laser cladding, the coat of 3.0 mm thick can be made with smooth surface. The test and comparison analysis indicate that the structure and all performance have obvious advantages over that of the plasma spurt welding, bead welding and flame welding processing

  14. A Summary of NASA Architecture Studies Utilizing Fission Surface Power Technology

    Science.gov (United States)

    Mason, Lee S.; Poston, David I.

    2011-01-01

    Beginning with the Exploration Systems Architecture Study in 2005, NASA has conducted various mission architecture studies to evaluate implementation options for the U.S. Space Policy. Several of the studies examined the use of Fission Surface Power (FSP) systems for human missions to the lunar and Martian surface. This paper summarizes the FSP concepts developed under four different NASA-sponsored architecture studies: Lunar Architecture Team, Mars Architecture Team, Lunar Surface Systems/Constellation Architecture Team, and International Architecture Working Group-Power Function Team.

  15. Fabrication of corrugated artificial insect wings using laser micromachined molds

    International Nuclear Information System (INIS)

    Tanaka, Hiroto; Wood, Robert J

    2010-01-01

    This paper describes the fabrication of an artificial insect wing with a rich set of topological features by micromolding a thermosetting resin. An example 12 mm long hoverfly-like wing is fabricated with 50–125 µm vein heights and 100 µm corrugation heights. The solid veins and membrane were simultaneously formed and integrated by a single molding process. Employing a layered laser ablation technique, three-dimensional molds were created with 5 µm resolution in height. Safe demolding of the wing was achieved with a water-soluble sacrificial layer on the mold. Measured surface profiles of the wing matched those of the molds, demonstrating the high replication accuracy of this molding process. Using this process, the morphological features of insect wings can be replicated at-scale with high precision, enabling parametric experiments of the functional morphology of insect wings. This fabrication capability also makes it possible to create a variety of wing types for micro air vehicles on scales similar to insects.

  16. A LabVIEWTM-based scanning and control system for proton beam micromachining

    International Nuclear Information System (INIS)

    Bettiol, Andrew A.; Kan, J.A. van; Sum, T.C.; Watt, F.

    2001-01-01

    LabVIEW TM is steadily gaining in popularity as the programming language of choice for scientific data acquisition and control. This is due to the vast array of measurement instruments and data acquisition cards supported by the LabVIEW TM environment, and the relative ease with which advanced software can be programmed. Furthermore, virtual instruments that are designed for a given system can be easily ported to other LabVIEW TM platforms and hardware. This paper describes the new LabVIEW TM based scanning and control system developed specifically for proton beam micromachining (PBM) applications. The new system is capable of scanning figures at 16-bit resolution with improved sub-microsecond scan rates. Support for electrostatic beam blanking and external dose normalization using a TTL signal have been implemented. The new software incorporates a semi-automated dose calibration system, and a number of novel dose normalization methods. Limitations of the current beam scanning hardware are discussed in light of new results obtained from micromachining experiments performed in SU-8 photoresist

  17. Millimeter length micromachining using a heavy ion nuclear microprobe with standard magnetic scanning

    Energy Technology Data Exchange (ETDEWEB)

    Nesprías, F. [Gerencia de Investigación y Aplicaciones, Comisión Nacional de Energía Atómica, Av. Gral Paz 1499 (1650), San Martín, Buenos Aires (Argentina); Debray, M.E., E-mail: debray@tandar.cnea.gov.ar [Gerencia de Investigación y Aplicaciones, Comisión Nacional de Energía Atómica, Av. Gral Paz 1499 (1650), San Martín, Buenos Aires (Argentina); Escuela de Ciencia y Tecnología. Universidad Nacional de Gral. San Martín, M. De Irigoyen 3100 (1650), San Martín, Buenos Aires (Argentina); Davidson, J. [Gerencia de Investigación y Aplicaciones, Comisión Nacional de Energía Atómica, Av. Gral Paz 1499 (1650), San Martín, Buenos Aires (Argentina); CONICET, Avda. Rivadavia 1917 (C1033AAJ), Ciudad Autónoma de Buenos Aires (Argentina); Kreiner, A.J. [Gerencia de Investigación y Aplicaciones, Comisión Nacional de Energía Atómica, Av. Gral Paz 1499 (1650), San Martín, Buenos Aires (Argentina); Escuela de Ciencia y Tecnología. Universidad Nacional de Gral. San Martín, M. De Irigoyen 3100 (1650), San Martín, Buenos Aires (Argentina); CONICET, Avda. Rivadavia 1917 (C1033AAJ), Ciudad Autónoma de Buenos Aires (Argentina); and others

    2013-04-01

    In order to increase the scanning length of our microprobe, we have developed an irradiation procedure suitable for use in any nuclear microprobe, extending at least up to 400% the length of our heavy ion direct writing facility using standard magnetic exploration. Although this method is limited to patterns of a few millimeters in only one direction, it is useful for the manufacture of curved waveguides, optical devices such Mach–Zehnder modulators, directional couplers as well as channels for micro-fluidic applications. As an example, this technique was applied to the fabrication of 3 mm 3D-Mach–Zehnder modulators in lithium niobate with short Y input/output branches and long shaped parallel-capacitor control electrodes. To extend and improve the quality of the machined structures we developed new scanning control software in LabView™ platform. The new code supports an external dose normalization, electrostatic beam blanking and is capable of scanning figures at 16 bit resolution using a National Instruments™ PCI-6731 High-Speed I/O card. A deep and vertical micromachining process using swift {sup 35}Cl ions 70 MeV bombarding energy and direct write patterning was performed on LiNbO{sub 3}, a material which exhibits a strong natural anisotropy to conventional etching. The micromachined structures show the feasibility of this method for manufacturing micro-fluidic channels as well.

  18. Differential search algorithm-based parametric optimization of electrochemical micromachining processes

    Directory of Open Access Journals (Sweden)

    Debkalpa Goswami

    2014-01-01

    Full Text Available Electrochemical micromachining (EMM appears to be a very promising micromachining process for having higher machining rate, better precision and control, reliability, flexibility, environmental acceptability, and capability of machining a wide range of materials. It permits machining of chemically resistant materials, like titanium, copper alloys, super alloys and stainless steel to be used in biomedical, electronic, micro-electromechanical system and nano-electromechanical system applications. Therefore, the optimal use of an EMM process for achieving enhanced machining rate and improved profile accuracy demands selection of its various machining parameters. Various optimization tools, primarily Derringer’s desirability function approach have been employed by the past researchers for deriving the best parametric settings of EMM processes, which inherently lead to sub-optimal or near optimal solutions. In this paper, an attempt is made to apply an almost new optimization tool, i.e. differential search algorithm (DSA for parametric optimization of three EMM processes. A comparative study of optimization performance between DSA, genetic algorithm and desirability function approach proves the wide acceptability of DSA as a global optimization tool.

  19. Development of an electrochemical micromachining instrument for the confined etching techniques.

    Science.gov (United States)

    Zhou, Hang; Lai, Lei-Jie; Zhao, Xiang-Hui; Zhu, Li-Min

    2014-04-01

    This study proposes an electrochemical micromachining instrument for two confined etching techniques, namely, confined etchant layer technique (CELT) and electrochemical wet stamping (E-WETS). The proposed instrument consists of a granite bridge base, a Z-axis coarse/fine dual stage, and a force sensor. The Z-axis coarse/fine dual stage controls the vertical movement of the substrate with nanometer accuracy. The force sensor measures the contact force between the mold and the substrate. A contact detection method based on a digital lock-in amplifier is developed to make the mold-substrate contact within a five-nanometer range in CELT, and a force feedback controller is implemented to keep the contact force in E-WETS at a constant value with a noise of less than 0.2 mN. With the use of the confined etching techniques, a microlens array and a curvilinear ridge microstructure are successfully fabricated with high accuracy, thus demonstrating the promising performance of the proposed micromachining instrument.

  20. Improvement of integrated technology for restoring surfaces of steel and iron parts

    Science.gov (United States)

    Tarelnyk, V.; Martsynkovskyy, V.; Sarzhanov, A.; Pavlov, A.; Gerasimenko, V.; Sarzhanov, B.

    2017-08-01

    There have been proposed new technical solutions including operations of applying coatings onto worn surfaces of steel and cast iron parts by electro-erosive alloying method (EEA). In this case, the EEA coatings are applied in two stages. At the first stage, there is applied a layer on the conditions providing the greatest thickness and continuity of the surfaces obtained. At the second stage, the operation is performed by the same electrode and on the conditions of the discharge energy and productivity corresponding thereto, which provide for the formation of the surface having a roughness value being about 2-4 times higher than that at the previous stage. At least one layer of a metal polymer material (MPM) is applied on the surface formed by the above said EEA method, with this layer having been reinforced by at least one wire reinforcement layer before polymerization.

  1. Enhancement of biocompatibility of nickel-titanium by laser surface modification technology

    Science.gov (United States)

    Ng, Ka Wai

    Nickel Titanium is a relatively new biomaterial that has attracted research interest for biomedical application. The good biocompatibility with specific functional properties of shape memory effect and superelasticity creates a smart material for medical applications. However, there are still concerns on nickel ion release of this alloy if it is going to be implanted for a long time. Nickel ion is carcinogenic and also causes allergic response and degeneration of muscle tissue. The subsequent release of Ni+ ions into the body system is fatal for the long term application of this alloy in the human body. To improve the long term biocompatibility and corrosion properties of NiTi, different surface treatment techniques have been investigated but no optimum technique has been established yet. This project will investigate the feasibility of applying laser surface alloying technique to improve the corrosion resistance and biocompatibility of NiTi in simulated body fluid condition. This thesis summarizes the result of laser surface modification of NiTi with Mo, Nb and Co using CO2 laser. The modified layer, which is free of microcracks and pores, acts as physical barrier to reduce nickel release and enhance the surface properties. The hardness values of the Mo-alloyed NiTi, Nb-alloyed NiTi and Co-alloyed NiTi surface were found to be three to four times harder than the NiTi substrate. Corrosion polarization tests also showed that the alloyed NiTi are significantly more resistant than the NiTi alloy. The release of Ni ions can be greatly reduced after laser surface alloying NiTi with Mo, Nb and Co. The improvement in wettability characteristics, the growth of the apatite on the specimen's surface and the adhesion of cell confirm the good biocompatibility after laser surface alloying. It is concluded that laser surface alloying is one of the potential technique not only to improve the corrosion resistance with low nickel release rate, but also retain the good

  2. A comparison of surface topography characterization technologies for use in comparing spent bullet and cartridge case signatures

    Energy Technology Data Exchange (ETDEWEB)

    Batishko, C.R.; Hickman, B.J.; Cuta, F.M.

    1992-11-01

    The Pacific Northwest Laboratory was tasked by the US Department of Energy to provide technical assistance to the Federal Bureau of Investigation in evaluating and ranking technologies potentially useful in high-speed comparison of unique spent bullet and cartridge case surface signatures. Information sources included vendor input, current relevant literature, vendor phone contacts, other FBI resources, relevant PNL reports, and personal contact with numerous PNL technical staff. A comprehensive list of technologies was reduced to a list of 38 by grouping very similar methodologies, and further reduced to a short list of six by applying a set of five minimum functional requirements. A total of 14 primary criteria, many having secondary criteria, were subsequently used to evaluate each technology. The ranked short list results are reported and supported in this document, and their scores normalized to a hypothetical ideal system are as follows: (1) confocal microscopy 82.13; (2) laser dynamic focusing 72.04; (3)moire interferometry V70.94; (4)fringe field capacitance;(5)laser triangulation 66.18; (6)structured/sectioned light 65.55. Information available within the time/budget constraints which was used for the evaluation and ranking was not sufficiently detailed to evaluate specific implementations of the technologies. Each of the technologies in the short list was judged potentially capable of meeting the minimum requirements. Clever, novel engineering solutions resulting in a more cost-effective system, or a closer fit to the ``ideal system,`` could result in a reordering of the short list when actual technical proposals are evaluated. Therefore, it is recommended that a Request for Proposal not be limited to only the highest ranked technology, but include all six technologies in the short list.

  3. A comparison of surface topography characterization technologies for use in comparing spent bullet and cartridge case signatures

    Energy Technology Data Exchange (ETDEWEB)

    Batishko, C.R.; Hickman, B.J.; Cuta, F.M.

    1992-11-01

    The Pacific Northwest Laboratory was tasked by the US Department of Energy to provide technical assistance to the Federal Bureau of Investigation in evaluating and ranking technologies potentially useful in high-speed comparison of unique spent bullet and cartridge case surface signatures. Information sources included vendor input, current relevant literature, vendor phone contacts, other FBI resources, relevant PNL reports, and personal contact with numerous PNL technical staff. A comprehensive list of technologies was reduced to a list of 38 by grouping very similar methodologies, and further reduced to a short list of six by applying a set of five minimum functional requirements. A total of 14 primary criteria, many having secondary criteria, were subsequently used to evaluate each technology. The ranked short list results are reported and supported in this document, and their scores normalized to a hypothetical ideal system are as follows: (1) confocal microscopy 82.13; (2) laser dynamic focusing 72.04; (3)moire interferometry V70.94; (4)fringe field capacitance;(5)laser triangulation 66.18; (6)structured/sectioned light 65.55. Information available within the time/budget constraints which was used for the evaluation and ranking was not sufficiently detailed to evaluate specific implementations of the technologies. Each of the technologies in the short list was judged potentially capable of meeting the minimum requirements. Clever, novel engineering solutions resulting in a more cost-effective system, or a closer fit to the ideal system,'' could result in a reordering of the short list when actual technical proposals are evaluated. Therefore, it is recommended that a Request for Proposal not be limited to only the highest ranked technology, but include all six technologies in the short list.

  4. Development of Additive Construction Technologies for Application to Development of Lunar/Martian Surface Structures Using In-Situ Materials

    Science.gov (United States)

    Werkheiser, Niki J.; Fiske, Michael R.; Edmunson, Jennifer E.; Khoshnevis, Berokh

    2015-01-01

    For long-duration missions on other planetary bodies, the use of in situ materials will become increasingly critical. As human presence on these bodies expands, so must the breadth of the structures required to accommodate them including habitats, laboratories, berms, radiation shielding for natural radiation and surface reactors, garages, solar storm shelters, greenhouses, etc. Planetary surface structure manufacturing and assembly technologies that incorporate in situ resources provide options for autonomous, affordable, pre-positioned environments with radiation shielding features and protection from micrometeorites, exhaust plume debris, and other hazards. The ability to use in-situ materials to construct these structures will provide a benefit in the reduction of up-mass that would otherwise make long-term Moon or Mars structures cost prohibitive. The ability to fabricate structures in situ brings with it the ability to repair these structures, which allows for the self-sufficiency and sustainability necessary for long-duration habitation. Previously, under the auspices of the MSFC In-Situ Fabrication and Repair (ISFR) project and more recently, under the jointly-managed MSFC/KSC Additive Construction with Mobile Emplacement (ACME) project, the MSFC Surface Structures Group has been developing materials and construction technologies to support future planetary habitats with in-situ resources. One such additive construction technology is known as Contour Crafting. This paper presents the results to date of these efforts, including development of novel nozzle concepts for advanced layer deposition using this process. Conceived initially for rapid development of cementitious structures on Earth, it also lends itself exceptionally well to the automated fabrication of planetary surface structures using minimally processed regolith as aggregate, and binders developed from in situ materials as well. This process has been used successfully in the fabrication of

  5. Method of surface error visualization using laser 3D projection technology

    Science.gov (United States)

    Guo, Lili; Li, Lijuan; Lin, Xuezhu

    2017-10-01

    In the process of manufacturing large components, such as aerospace, automobile and shipping industry, some important mold or stamped metal plate requires precise forming on the surface, which usually needs to be verified, if necessary, the surface needs to be corrected and reprocessed. In order to make the correction of the machined surface more convenient, this paper proposes a method based on Laser 3D projection system, this method uses the contour form of terrain contour, directly showing the deviation between the actually measured data and the theoretical mathematical model (CAD) on the measured surface. First, measure the machined surface to get the point cloud data and the formation of triangular mesh; secondly, through coordinate transformation, unify the point cloud data to the theoretical model and calculate the three-dimensional deviation, according to the sign (positive or negative) and size of the deviation, use the color deviation band to denote the deviation of three-dimensional; then, use three-dimensional contour lines to draw and represent every coordinates deviation band, creating the projection files; finally, import the projection files into the laser projector, and make the contour line projected to the processed file with 1:1 in the form of a laser beam, compare the Full-color 3D deviation map with the projection graph, then, locate and make quantitative correction to meet the processing precision requirements. It can display the trend of the machined surface deviation clearly.

  6. Heterogeneous Wireless Mesh Network Technology Evaluation for Space Proximity and Surface Applications

    Science.gov (United States)

    DeCristofaro, Michael A.; Lansdowne, Chatwin A.; Schlesinger, Adam M.

    2014-01-01

    NASA has identified standardized wireless mesh networking as a key technology for future human and robotic space exploration. Wireless mesh networks enable rapid deployment, provide coverage in undeveloped regions. Mesh networks are also self-healing, resilient, and extensible, qualities not found in traditional infrastructure-based networks. Mesh networks can offer lower size, weight, and power (SWaP) than overlapped infrastructure-perapplication. To better understand the maturity, characteristics and capability of the technology, we developed an 802.11 mesh network consisting of a combination of heterogeneous commercial off-the-shelf devices and opensource firmware and software packages. Various streaming applications were operated over the mesh network, including voice and video, and performance measurements were made under different operating scenarios. During the testing several issues with the currently implemented mesh network technology were identified and outlined for future work.

  7. Study on dynamic deformation synchronized measurement technology of double-layer liquid surfaces

    Science.gov (United States)

    Tang, Huiying; Dong, Huimin; Liu, Zhanwei

    2017-11-01

    Accurate measurement of the dynamic deformation of double-layer liquid surfaces plays an important role in many fields, such as fluid mechanics, biomechanics, petrochemical industry and aerospace engineering. It is difficult to measure dynamic deformation of double-layer liquid surfaces synchronously for traditional methods. In this paper, a novel and effective method for full-field static and dynamic deformation measurement of double-layer liquid surfaces has been developed, that is wavefront distortion of double-wavelength transmission light with geometric phase analysis (GPA) method. Double wavelength lattice patterns used here are produced by two techniques, one is by double wavelength laser, and the other is by liquid crystal display (LCD). The techniques combine the characteristics such as high transparency, low reflectivity and fluidity of liquid. Two color lattice patterns produced by laser and LCD were adjusted at a certain angle through the tested double-layer liquid surfaces simultaneously. On the basis of the refractive indexes difference of two transmitted lights, the double-layer liquid surfaces were decoupled with GPA method. Combined with the derived relationship between phase variation of transmission-lattice patterns and out-of plane heights of two surfaces, as well as considering the height curves of the liquid level, the double-layer liquid surfaces can be reconstructed successfully. Compared with the traditional measurement method, the developed method not only has the common advantages of the optical measurement methods, such as high-precision, full-field and non-contact, but also simple, low cost and easy to set up.

  8. Determination of young's modulus of PZT and CO80Ni20 thin films by means of micromachined cantilevers

    NARCIS (Netherlands)

    Nazeer, H.; Abelmann, Leon; Tas, Niels Roelof; van Honschoten, J.W.; Siekman, Martin Herman; Elwenspoek, Michael Curt

    2009-01-01

    This paper presents a technique to determine the Young’s modulus and residual stress of thin films using a simple micromachined silicon cantilever as the test structure. An analytical relation was developed based on the shift in resonance frequency caused by the addition of a thin film on the

  9. A passive micromachined device for alignment of arrays of single-mode fibers for hermetic photonic packaging - the CLASP concept

    Energy Technology Data Exchange (ETDEWEB)

    Seigal, P.K.; Kravitz, S.H.; Word, J.C.; Bauer, T.M. [and others

    1997-02-01

    A micro-machined fiber alignment device, called CLASP (Capture and Locking Alignment Spring Positioner) has been fabricated. It uses a nickel leaf spring to passively capture vertical arrays of single-mode fibers with {approximately} 2 {mu}m accuracy.

  10. Feasibility of Cathode Surface Coating Technology for High-Energy Lithium-ion and Beyond-Lithium-ion Batteries.

    Science.gov (United States)

    Kalluri, Sujith; Yoon, Moonsu; Jo, Minki; Liu, Hua Kun; Dou, Shi Xue; Cho, Jaephil; Guo, Zaiping

    2017-12-01

    Cathode material degradation during cycling is one of the key obstacles to upgrading lithium-ion and beyond-lithium-ion batteries for high-energy and varied-temperature applications. Herein, we highlight recent progress in material surface-coating as the foremost solution to resist the surface phase-transitions and cracking in cathode particles in mono-valent (Li, Na, K) and multi-valent (Mg, Ca, Al) ion batteries under high-voltage and varied-temperature conditions. Importantly, we shed light on the future of materials surface-coating technology with possible research directions. In this regard, we provide our viewpoint on a novel hybrid surface-coating strategy, which has been successfully evaluated in LiCoO 2 -based-Li-ion cells under adverse conditions with industrial specifications for customer-demanding applications. The proposed coating strategy includes a first surface-coating of the as-prepared cathode powders (by sol-gel) and then an ultra-thin ceramic-oxide coating on their electrodes (by atomic-layer deposition). What makes it appealing for industry applications is that such a coating strategy can effectively maintain the integrity of materials under electro-mechanical stress, at the cathode particle and electrode- levels. Furthermore, it leads to improved energy-density and voltage retention at 4.55 V and 45 °C with highly loaded electrodes (≈24 mg.cm -2 ). Finally, the development of this coating technology for beyond-lithium-ion batteries could be a major research challenge, but one that is viable. © 2017 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

  11. Naval Surface Warfare Center Dahlgren Division Technical Digest. Advanced Materials Technology

    Science.gov (United States)

    1993-09-01

    from Yardney degradation caused by storage. Technical Products Inc. These cells (Figure 3) were 7.50" high x 2.01" wide x 1.04" deep and weighed 1.1... Yardney Power Systems Brochure. The next stage of the program is directed Rechargeable Sihvercels. toward scaling up the technology to a size 5, NAVSEA

  12. Exercise in Experimental Plastics Technology: Hot Embossing of Polymers with surface microstructure

    DEFF Research Database (Denmark)

    Eriksson, Torbjörn Gerhard; Rasmussen, Henrik Koblitz

    2004-01-01

    Hot Embossing of polymers with surface microstructure Polymer materials have proven to be good materials for manufacturing nano/ and microstructure. There are three major processing techniques: hot embossing, injection moulding and casting. Hot embossing provides several advantages such as relati......Hot Embossing of polymers with surface microstructure Polymer materials have proven to be good materials for manufacturing nano/ and microstructure. There are three major processing techniques: hot embossing, injection moulding and casting. Hot embossing provides several advantages...... such as relatively low cost for embossing tools, simple operation and high replication accuracy for small features. Two different plastic materials will be used to replicate surface microstructures by hot embossing. The hot embossing will be done in a hydraulic press where it is easy to control temperature...

  13. Experimental Comparison of the Tribological Properties of Selected Surfaces Created by Thermal Spraying Technology

    Directory of Open Access Journals (Sweden)

    František Tóth

    2016-01-01

    Full Text Available The scientific article titled “Experimental comparison of the tribological properties of selected surfaces created by thermal spraying technology” deals with the surface condition of selected pairs working within the mixed friction before and after experimental tests. Based on the chosen methodology, the experimental tests were performed on the Tribotestor M’06 testing machine. The ecological oil MOGUL HEES 46 (manufactured by Paramo was used as a lubricant. The tests were performed on selected material pairs. The first friction element was a shaft of steel 14 220. The second friction element was a steel plate of steel 11 373 with a friction surface created by two materials, i.e. CuSn10 and NP 40. The results are statistically elaborated and illustrated in figures and tables.

  14. Lunar and planetary surface conditions advances in space science and technology

    CERN Document Server

    Weil, Nicholas A

    1965-01-01

    Lunar and Planetary Surface Conditions considers the inferential knowledge concerning the surfaces of the Moon and the planetary companions in the Solar System. The information presented in this four-chapter book is based on remote observations and measurements from the vantage point of Earth and on the results obtained from accelerated space program of the United States and U.S.S.R. Chapter 1 presents the prevalent hypotheses on the origin and age of the Solar System, followed by a brief description of the methods and feasibility of information acquisition concerning lunar and planetary data,

  15. Hewlett Packard's inkjet MEMS technology: past, present, and future

    Science.gov (United States)

    Stasiak, J.; Richards, S.; Angelos, S.

    2009-05-01

    In 1985, HP introduced the ThinkJet - the first low-cost, mass-produced thermal inkjet printer. Providing a reasonable alternative to noisy dot matrix printers, ThinkJet set the stage for subsequent generations of HP thermal inkjet technology (TIJ). With each new generation, HP TIJ products provided new standards for print quality, color, and an unprecedented cost/performance ratio. Regarded as the first and most successful commercial MEMS technology, the development of HP's TIJ printheads required multidisciplinary innovation in fluid dynamics, bulk and surface micromachining, large-scale integration of electronics, packaging, and high volume MEMS manufacturing. HP's current TIJ printhead products combine Pentium-class addressing circuitry, high voltage mixed-signal driver electronics, dense electrical interconnects, and up to 3900 high-precision microfluidic devices - all on a single silicon chip. In this paper, we will provide a brief history of HP's TIJ technology and discuss how the unique capabilities that were required to advance the state-of-the-art of TIJ printheads are now providing a platform for the development of new MEMS devices and systems.

  16. Diamond semiconductor technology for RF device applications

    Science.gov (United States)

    Gurbuz, Yasar; Esame, Onur; Tekin, Ibrahim; Kang, Weng P.; Davidson, Jimmy L.

    2005-07-01

    This paper presents a comprehensive review of diamond electronics from the RF perspective. Our aim was to find and present the potential, limitations and current status of diamond semiconductor devices as well as to investigate its suitability for RF device applications. While doing this, we briefly analysed the physics and chemistry of CVD diamond process for a better understanding of the reasons for the technological challenges of diamond material. This leads to Figure of Merit definitions which forms the basis for a technology choice in an RF device/system (such as transceiver or receiver) structure. Based on our literature survey, we concluded that, despite the technological challenges and few mentioned examples, diamond can seriously be considered as a base material for RF electronics, especially RF power circuits, where the important parameters are high speed, high power density, efficient thermal management and low signal loss in high power/frequencies. Simulation and experimental results are highly regarded for the surface acoustic wave (SAW) and field emission (FE) devices which already occupies space in the RF market and are likely to replace their conventional counterparts. Field effect transistors (FETs) are the most promising active devices and extremely high power densities are extracted (up to 30 W/mm). By the surface channel FET approach 81 GHz operation is developed. Bipolar devices are also promising if the deep doping problem can be solved for operation at room temperature. Pressure, thermal, chemical and acceleration sensors have already been demonstrated using micromachining/MEMS approach, but need more experimental results to better exploit thermal, physical/chemical and electronic properties of diamond.

  17. A Technology Demonstrator for 1.6–2.0 THz Waveguide HEB Receiver with a Novel Mixer Layout

    OpenAIRE

    Dochev, Dimitar; Desmaris, Vincent; Meledin, Denis; Pavolotsky, Alexey; Belitsky, Victor

    2011-01-01

    In this paper, we present our studies on a technology demonstrator for a balanced waveguide hot-electron bolometer (HEB) mixer operating in the 1.6–2.0 THz band. The design employs a novel layout for the HEB mixer combining several key technologies: all-metal THz waveguide micromachining, ultra-thin NbN film deposition and a micromachining of a silicon-on-insulator (SOI) substrate to manufacture the HEB mixer. In this paper, we present a novel mixer layout that greatly facilitates handling an...

  18. [Optimization of dissolution process for superfine grinding technology on total saponins of Panax ginseng fibrous root by response surface methodology].

    Science.gov (United States)

    Zhao, Ya; Lai, Xiao-Pin; Yao, Hai-Yan; Zhao, Ran; Wu, Yi-Na; Li, Geng

    2014-03-01

    To investigate the effects of superfine comminution extraction technology of ginseng total saponins from Panax ginseng fibrous root, and to make sure the optimal extraction condition. Optimal condition of ginseng total saponins from Panax ginseng fibrous root was based on single factor experiment to study the effects of crushing degree, extraction time, alcohol concentration and extraction temperature on extraction rate. Response surface method was used to investigate three main factors such as superfine comminution time, extraction time and alcohol concentration. The relationship between content of ginseng total saponins in Panax ginseng fibrous root and three factors fitted second degree polynomial models. The optimal extraction condition was 9 min of superfine comminution time, 70% of alcohol, 50 degrees C of extraction temperature and 70 min of extraction time. Under the optimal condition, ginseng total saponins from Panax ginseng fibrous root was average 94. 81%, which was consistent with the predicted value. The optimization of technology is rapid, efficient, simple and stable.

  19. Cloud tolerance of remote sensing technologies to measure land surface temperature

    Science.gov (United States)

    Conventional means to estimate land surface temperature (LST) from space relies on the thermal infrared (TIR) spectral window and is limited to cloud-free scenes. To also provide LST estimates during periods with clouds, a new method was developed to estimate LST based on passive microwave (MW) obse...

  20. Application of ultraviolet C technology for surface decontamination of fresh produce

    Science.gov (United States)

    Ultraviolet C (UV-C) employs physical light energy to inactivate microorganisms. This article discusses factors affecting the efficacy of UV-C against common foodborne pathogenic bacteria for food surface decontamination, means to assess and overcome the shading effect, survival and growth of patho...

  1. Proceedings of workshop on surface finishing by radiation curing technology: radiation curing for better finishing

    International Nuclear Information System (INIS)

    1993-01-01

    This book compiled the paper presented at this workshop. The papers discussed are 1. Introduction to radiation curing, 2. Radiation sources -ultraviolet and electron beams, 3. UV/EB curing of surface coating - wood and nonwood substrates, 4. Development of EPOLA (epoxidised palm oil products acrylate) and its application, 5. Development of radiation-curable resin based natural rubber

  2. Technology.

    Science.gov (United States)

    Online-Offline, 1998

    1998-01-01

    Focuses on technology, on advances in such areas as aeronautics, electronics, physics, the space sciences, as well as computers and the attendant progress in medicine, robotics, and artificial intelligence. Describes educational resources for elementary and middle school students, including Web sites, CD-ROMs and software, videotapes, books,…

  3. Development of the removal technology for toxic heavy metal ions by surface-modified activated carbon

    Energy Technology Data Exchange (ETDEWEB)

    Park, Geun Il; Song, Kee Chan; Kim, Kwang Wook; Kim, In Tae; Cho, Il Hoon; Kim, Joon Hyung

    2001-01-01

    Adsorption capacities of both radionuclides(uranium, cobalt) and toxic heavy metals (lead, cadmium and chromium) using double surface-modified activated carbon in wide pH ranges are extensively evaluated. Surface-modified activated carbons are classified as AC(as-received carbon), OAC(single surface-modified carbon with nitric acid solution) and OAC-Na(double surface-modified carbon with various alkali solutions). It is established that optimal condition for the second surface modification of OAC is to use the mixed solution of both NaOH and NaCl with total concentration of 0.1 N based on adsorption efficiencies of uranium and cobalt. Variations of adsorption efficiencies in pH ranges of 2{approx}10 and the adsorption capacities in batch adsorber and fixed bed for removal of both radionuclides and toxic heavy metals using OAC-Na were shown to be superior to that of the AC and OAC even in a low pH range. Capacity factors of OAC-Na for the removal of various metal ions are also excellent to that of AC or OAC. Quantitative analysis of capacity factors for each ions showed that adsorption capacity of OAC-Na increased by 30 times for uranium, 60 times for cobalt, 9 times for lead, 30 times for cadmium, 3 times for chromium compared to that of AC at pH 5, respectively. Adsorption capacity of OAC-Na is comparable to that of XAD-16-TAR used as commercial ion exchange resin.

  4. Ultrasonic detection technology based on joint robot on composite component with complex surface

    Energy Technology Data Exchange (ETDEWEB)

    Hao, Juan; Xu, Chunguang; Zhang, Lan [School of Mechanical Engineering, Beijing Institute of Technology, Beijing (China)

    2014-02-18

    Some components have complex surface, such as the airplane wing and the shell of a pressure vessel etc. The quality of these components determines the reliability and safety of related equipment. Ultrasonic nondestructive detection is one of the main methods used for testing material defects at present. In order to improve the testing precision, the acoustic axis of the ultrasonic transducer should be consistent with the normal direction of the measured points. When we use joint robots, automatic ultrasonic scan along the component surface normal direction can be realized by motion trajectory planning and coordinate transformation etc. In order to express the defects accurately and truly, the robot position and the signal of the ultrasonic transducer should be synchronized.

  5. Biomimicry using Nano-Engineered Enhanced Condensing Surfaces for Sustainable Fresh Water Technology

    OpenAIRE

    Al-Beaini, Sara

    2012-01-01

    Biomimicry offers innovative sustainable solutions for many dire resource-based challenges. The Namib Desert beetle (sp. Stenocara) invites us to explore how we can collect fresh water more energy-efficiently. The beetle's unique back features with alternating hydrophobic-hydrophilic regions, aid its survival in a water scarce desert environment. We investigated the feasibility for enhanced condensation by patterning a zinc oxide (ZnO) surface to mimic the beetle's back. ZnO was selected as t...

  6. Research on Laser Micro Polishing of SLS Technology Sintered Iron-Based Powder Surface

    OpenAIRE

    Gerda Vaitkūnaitė; Vladislav Markovič; Olegas Černašėjus

    2015-01-01

    The article analyzes laser micro polishing of 1.2083 steel samples produced applying selective laser sintering (SLS) method. The study has evaluated the distribution of the shape, size and temperature of the laser beam treated area in the surface layer of sintered and laser polished samples. Experimental tests have shown the impact of the technical parameters of laser micro polishing on the width and hardness of the impact zone of the treated sample. The microstructure analysis of laser treat...

  7. Surface processing by high power excimer laser

    International Nuclear Information System (INIS)

    Stehle, M.

    1995-01-01

    Surface processing with lasers is a promising field of research and applications because lasers bring substantial advantages : laser beams work at distance, laser treatments are clean in respect of environment consideration and they offer innovative capabilities for surface treatment which cannot be reached by other way. Excimer lasers are pulsed, gaseous lasers which emit in UV spectral range - the most common are XeCl (308 nm), KrF (248 nm), ArF (193 nm). From 1980 up to 1994, many of them have been used for research, medical and industrial applications such as spectroscopy, PRK (photo-refractive keratotomy) and micro-machining. In the last six years, from 1987 up to 1993, efforts have been done in order to jump from 100 W average power up to 1 kW for XeCl laser at λ = 308 nm. It was the aim of AMMTRA project in Japan as EU205 and EU213 Eureka projects in Europe. In this framework, SOPRA developed VEL (Very large Excimer Laser). In 1992, 1 kW (10 J x 100 Hz) millstone has been reached for the first time, this technology is based on X-Ray preionization and large laser medium (5 liters). Surface treatments based on this laser source are the main purpose of VEL Lasers. Some of them are given for instance : a) Turbine blades made with metallic substrate and ceramic coatings on the top, are glazed in order to increase corrosion resistance of ceramic and metal sandwich. b) Selective ablation of organic coatings deposited on fragile composite material is investigated in Aerospace industry. c) Chock hardening of bulk metallic materials or alloys are investigated for automotive industry in order to increase wear resistance. d) Ablation of thin surface oxides of polluted steels are under investigation in nuclear industry for decontamination. (J.P.N.)

  8. Modeling and Design of Capacitive Micromachined Ultrasonic Transducers Based-on Database Optimization

    International Nuclear Information System (INIS)

    Chang, M W; Gwo, T J; Deng, T M; Chang, H C

    2006-01-01

    A Capacitive Micromachined Ultrasonic Transducers simulation database, based on electromechanical coupling theory, has been fully developed for versatile capacitive microtransducer design and analysis. Both arithmetic and graphic configurations are used to find optimal parameters based on serial coupling simulations. The key modeling parameters identified can improve microtransducer's character and reliability effectively. This method could be used to reduce design time and fabrication cost, eliminating trial-and-error procedures. Various microtransducers, with optimized characteristics, can be developed economically using the developed database. A simulation to design an ultrasonic microtransducer is completed as an executed example. The dependent relationship between membrane geometry, vibration displacement and output response is demonstrated. The electromechanical coupling effects, mechanical impedance and frequency response are also taken into consideration for optimal microstructures. The microdevice parameters with the best output signal response are predicted, and microfabrication processing constraints and realities are also taken into consideration

  9. Double-section curvature tunable functional actuator with micromachined buckle and grid wire for electricity delivery

    International Nuclear Information System (INIS)

    Feng, Guo-Hua; Hou, Sheng-You

    2015-01-01

    This paper presents an ionic polymer metal composite (IPMC)-driven tentacle-like biocompatible flexible actuator with double-section curvature tunability. This actuator, possessing an embedded electrical transmission ability that mimics skeletal muscle nerves in the human body, affords versatile device functions. Novel micromachined copper buckles and grid wires are fabricated and their superiority in electricity delivery and driving the IPMC component with less flexural rigidity is demonstrated. In addition, soft conductive wires realized on a polydimethylsiloxane structure function as electrical signal transmitters. A light-emitting diode integrated with the developed actuator offers directional guiding light ability while the actuator performs a snake-like motion. The electrical conductivity and Young’s modulus of the key actuator components are investigated, and flexural rigidity and dynamic behavior analyses of the actuator under electrical manipulation are elaborated. (paper)

  10. Double-section curvature tunable functional actuator with micromachined buckle and grid wire for electricity delivery

    Science.gov (United States)

    Feng, Guo-Hua; Hou, Sheng-You

    2015-09-01

    This paper presents an ionic polymer metal composite (IPMC)-driven tentacle-like biocompatible flexible actuator with double-section curvature tunability. This actuator, possessing an embedded electrical transmission ability that mimics skeletal muscle nerves in the human body, affords versatile device functions. Novel micromachined copper buckles and grid wires are fabricated and their superiority in electricity delivery and driving the IPMC component with less flexural rigidity is demonstrated. In addition, soft conductive wires realized on a polydimethylsiloxane structure function as electrical signal transmitters. A light-emitting diode integrated with the developed actuator offers directional guiding light ability while the actuator performs a snake-like motion. The electrical conductivity and Young’s modulus of the key actuator components are investigated, and flexural rigidity and dynamic behavior analyses of the actuator under electrical manipulation are elaborated.

  11. Development of Capacitive Micromachined Ultrasonic Transducer (I) - Analysis of the Membrane Behavior

    Energy Technology Data Exchange (ETDEWEB)

    Kim, Ki Bok; Ahn, Bong Young; Park, Hae Won; Kim, Young Joo; Lee, Seung Seok [Korea Research Institute of Standards and Science, Daejeon (Korea, Republic of)

    2004-10-15

    This study was conducted to develop a capacitive micromachined ultrasonic transducer (cMUT) which enable to high efficient non-contact transmit and receive the ultrasonic wave in air. Theoretical analysis and finite element analysis of the behavior of membrane (such as resonance frequency, membrane deflection, collapse deflection and collapse voltage) of the cMUT were performed. The design parameters of the cMUT such as the dimension and thickness of membrane, thickness of sacrificial layer, thickness and size of electrode were estimated. The resonance frequency of the membrane increased as the thickness of the membrane increased but decreased as the diameter of the membrane increased. The deflection of the membrane increased as d-c bias voltage increased. The collapse voltage of the membrane was analyzed

  12. Modeling and analysis of the membrane-behavior in capacitive micromachined ultrasonic transducer

    International Nuclear Information System (INIS)

    Kim, Ki Bok; Ahn, Bong Young; Park, Hae Won; Kim, Young Joo; Kim, Kuk Jin; Lee, Seung Seok

    2003-01-01

    In this study, theoretical analysis and finite element analysis of the behavior of membrane (such as resonance frequency, membrane deflection, collapse deflection and collapse voltage) in the capacitive micromachined ultrasonic transducer (cMUT) were performed. The design parameters of the cMUT were estimated and are the dimension and thickness of membrane, thickness of sacrificial layer, thickness and size of electrode, size of active element and so on. The resonance frequency of the membrane increased as the thickness of the membrane increased but decreased as the diameter of the membrane increased. The deflection of the membrane increased as d-c bias voltage increased. The collapse voltage of the membrane was predicted.

  13. Low temperature capacitive micromachined ultrasonic transducers (cMUTs) on glass substrate

    International Nuclear Information System (INIS)

    Bahette, E; Michaud, J F; Certon, D; Gross, D; Perroteau, M; Alquier, D

    2016-01-01

    The possibility of fabricating capacitive micromachined ultrasonic transducers (cMUTs) on glass substrates may open the way for new fields of application in which the transparency of the substrate is advantageous. In this study, we demonstrate that a low-temperature process can be carried out to achieve cMUTs on glass substrates. Limited to temperatures lower than 400 °C, the process is based on the use of nickel as a sacrificial layer. The cMUT electromechanical behavior is studied and the performance compared to those obtained with silicon substrates. The cMUTs fabricated on glass substrate showed performance comparable with the Si ones. A slight shift in the resonance frequency and collapse voltage was observed. It is shown that these differences arise from the residual mechanical stresses in the substrate. (paper)

  14. Modeling and analysis of the membrane-behavior in capacitive micromachined ultrasonic transducer

    Energy Technology Data Exchange (ETDEWEB)

    Kim, Ki Bok; Ahn, Bong Young; Park, Hae Won; Kim, Young Joo; Kim, Kuk Jin; Lee, Seung Seok [NDE Group, Korea Research Institute of Standards and Science, Daejeon (Korea, Republic of)

    2003-05-15

    In this study, theoretical analysis and finite element analysis of the behavior of membrane (such as resonance frequency, membrane deflection, collapse deflection and collapse voltage) in the capacitive micromachined ultrasonic transducer (cMUT) were performed. The design parameters of the cMUT were estimated and are the dimension and thickness of membrane, thickness of sacrificial layer, thickness and size of electrode, size of active element and so on. The resonance frequency of the membrane increased as the thickness of the membrane increased but decreased as the diameter of the membrane increased. The deflection of the membrane increased as d-c bias voltage increased. The collapse voltage of the membrane was predicted.

  15. Modeling and analysis of the membrane-behavior in capacitive micromachined ultrasonic transducer

    International Nuclear Information System (INIS)

    Kim, Ki Bok; Ahn, Bong Young; Park, Hae Won; Kim, Young Joo; Kim, Kuk Jin; Lee, Seung Seok

    2003-01-01

    In this study, theoretical analysis and finite element analysis of the behavior of membrane (such as resonance frequency, membrane deflection, collapse deflection and collapse voltage) in the capacitive micromachined ultrasonic transducer (cMUT) were performed. The design parameter of the cMUT were estimated and are the dimension and thickness of membrane, thickness of sacrificed layer, thickness and size of electrode, size of active element and so on. The resonance frequency of the membrane increased as the thickness of the membrane increased but decreased as the diameter of the membrane increased. The deflection of the membrane increased as d-c bias voltage increased. The collapse voltage of the membrane was predicted.

  16. Low temperature capacitive micromachined ultrasonic transducers (cMUTs) on glass substrate

    Science.gov (United States)

    Bahette, E.; Michaud, J. F.; Certon, D.; Gross, D.; Perroteau, M.; Alquier, D.

    2016-11-01

    The possibility of fabricating capacitive micromachined ultrasonic transducers (cMUTs) on glass substrates may open the way for new fields of application in which the transparency of the substrate is advantageous. In this study, we demonstrate that a low-temperature process can be carried out to achieve cMUTs on glass substrates. Limited to temperatures lower than 400 °C, the process is based on the use of nickel as a sacrificial layer. The cMUT electromechanical behavior is studied and the performance compared to those obtained with silicon substrates. The cMUTs fabricated on glass substrate showed performance comparable with the Si ones. A slight shift in the resonance frequency and collapse voltage was observed. It is shown that these differences arise from the residual mechanical stresses in the substrate.

  17. Development of Capacitive Micromachined Ultrasonic Transducer (I) - Analysis of the Membrane Behavior

    International Nuclear Information System (INIS)

    Kim, Ki Bok; Ahn, Bong Young; Park, Hae Won; Kim, Young Joo; Lee, Seung Seok

    2004-01-01

    This study was conducted to develop a capacitive micromachined ultrasonic transducer (cMUT) which enable to high efficient non-contact transmit and receive the ultrasonic wave in air. Theoretical analysis and finite element analysis of the behavior of membrane (such as resonance frequency, membrane deflection, collapse deflection and collapse voltage) of the cMUT were performed. The design parameters of the cMUT such as the dimension and thickness of membrane, thickness of sacrificial layer, thickness and size of electrode were estimated. The resonance frequency of the membrane increased as the thickness of the membrane increased but decreased as the diameter of the membrane increased. The deflection of the membrane increased as d-c bias voltage increased. The collapse voltage of the membrane was analyzed

  18. Fabrication of Vacuum-Sealed Capacitive Micromachined Ultrasonic Transducer Arrays Using Glass Reflow Process

    Directory of Open Access Journals (Sweden)

    Nguyen Van Toan

    2016-04-01

    Full Text Available This paper presents a process for the fabrication of vacuum-sealed capacitive micromachined ultrasonic transducer (CMUT arrays using glass reflow and anodic bonding techniques. Silicon through-wafer interconnects have been investigated by the glass reflow process. Then, the patterned silicon-glass reflow wafer is anodically bonded to an SOI (silicon-on-insulator wafer for the fabrication of CMUT devices. The CMUT 5 × 5 array has been successfully fabricated. The resonant frequency of the CMUT array with a one-cell radius of 100 µm and sensing gap of 3.2 µm (distance between top and bottom electrodes is observed at 2.84 MHz. The Q factor is approximately 1300 at pressure of 0.01 Pa.

  19. Finite Element Analysis of Capacitive Micromachined Ultrasonic Transducer (CMUT) for NDE Applications

    Science.gov (United States)

    Singh, Manvinder; Kommareddy, Vamshi; Kumar, Manoj; Ramaswamy, Sivaramanivas; Fan, Ying; Barshinger, James; Tian, Wei-Cheng; Kishore, Kuna

    2006-03-01

    This paper presents a comparison of three Finite Element approaches for modeling the behavior of a Capacitive Micromachined Ultrasonic Transducer (CMUT). CMUTs have become very popular over the last decade because of the comparable bandwidth, sensitivity and dynamic range with its piezoelectric counterparts. The ease of fabrication is an added advantage. Modeling of CMUTs is a coupled physics problem, which involves solving Electrostatics and Structural interactions simultaneous. Finite Element models of the CMUT are constructed using the commercial code ANSYS (9.0). Three different approaches of solving the coupled field problem are discussed and the results are compared for resonance frequency, collapse voltage, capacitance and electromechanical coupling coefficient. The approaches discussed involve sequentially coupled-field analysis, direct coupled-field analysis and reduced order modeling. Detailed results have been presented for the effect of variation in geometrical factors as predicted by the three models.

  20. The influence of acoustic damping on the transformation efficiency of capacitive micromachined ultrasonic transducer in air

    Science.gov (United States)

    Lee, Seung-Mok; Cha, Bu-sang; Okuyama, Masanori

    2010-10-01

    Acoustic damping of a capacitive micromachined ultrasonic transducer (CMUT) in air causes mechanical impedance to the membrane vibration, which significantly influences the transformation efficiency of the device. We observed the effect of acoustic damping on the transformation efficiency of a CMUT under various external acoustic pressure and device structure conditions; the results were compared with other factors such as capacitance variations originating from the change in air-hole rate [area ratio (AR)] over the total membrane area. The damping ratio of the perforated membrane plate was computed for each acoustic pressure condition, and the results were introduced into calculations of the membrane displacement using the finite element method to take the squeeze-film damping effect into account. The Q factor and transformation efficiency of the CMUT under various AR for the membrane and dimension conditions of the device were studied; the acoustic damping effect is discussed in terms of design optimization.

  1. Deep Tissue Photoacoustic Imaging Using a Miniaturized 2-D Capacitive Micromachined Ultrasonic Transducer Array

    Science.gov (United States)

    Kothapalli, Sri-Rajasekhar; Ma, Te-Jen; Vaithilingam, Srikant; Oralkan, Ömer

    2014-01-01

    In this paper, we demonstrate 3-D photoacoustic imaging (PAI) of light absorbing objects embedded as deep as 5 cm inside strong optically scattering phantoms using a miniaturized (4 mm × 4 mm × 500 µm), 2-D capacitive micromachined ultrasonic transducer (CMUT) array of 16 × 16 elements with a center frequency of 5.5 MHz. Two-dimensional tomographic images and 3-D volumetric images of the objects placed at different depths are presented. In addition, we studied the sensitivity of CMUT-based PAI to the concentration of indocyanine green dye at 5 cm depth inside the phantom. Under optimized experimental conditions, the objects at 5 cm depth can be imaged with SNR of about 35 dB and a spatial resolution of approximately 500 µm. Results demonstrate that CMUTs with integrated front-end amplifier circuits are an attractive choice for achieving relatively high depth sensitivity for PAI. PMID:22249594

  2. Modeling and analysis of the membrane-behavior in capacitive micromachined ultrasonic transducer

    Energy Technology Data Exchange (ETDEWEB)

    Kim, Ki Bok; Ahn, Bong Young; Park, Hae Won; Kim, Young Joo; Kim, Kuk Jin; Lee, Seung Seok [Korea Research Institute of Standards and Science, Daejeon (Korea, Republic of)

    2003-07-01

    In this study, theoretical analysis and finite element analysis of the behavior of membrane (such as resonance frequency, membrane deflection, collapse deflection and collapse voltage) in the capacitive micromachined ultrasonic transducer (cMUT) were performed. The design parameter of the cMUT were estimated and are the dimension and thickness of membrane, thickness of sacrificed layer, thickness and size of electrode, size of active element and so on. The resonance frequency of the membrane increased as the thickness of the membrane increased but decreased as the diameter of the membrane increased. The deflection of the membrane increased as d-c bias voltage increased. The collapse voltage of the membrane was predicted.

  3. Corporate array of micromachined dipoles on silicon wafer for 60 GHz communication systems

    KAUST Repository

    Sallam, M. O.

    2013-03-01

    In this paper, an antenna array operating at 60 GHz and realized on 0.675 mm thick silicon substrate is presented. The array is constructed using four micromachined half-wavelength dipoles fed by a corporate feeding network. Isolation between the antenna array and its feeding network is achieved via a ground plane. This arrangement leads to maximizing the broadside radiation with relatively high front-to-back ratio. Simulations have been carried out using both HFSS and CST, which showed very good agreement. Results reveal that the proposed antenna array has good radiation characteristics, where the directivity, gain, and radiation efficiency are around 10.5 dBi, 9.5 dBi, and 79%, respectively. © 2013 IEEE.

  4. Multifrequency Excitation Method for Rapid and Accurate Dynamic Test of Micromachined Gyroscope Chips

    Directory of Open Access Journals (Sweden)

    Yan Deng

    2014-10-01

    Full Text Available A novel multifrequency excitation (MFE method is proposed to realize rapid and accurate dynamic testing of micromachined gyroscope chips. Compared with the traditional sweep-frequency excitation (SFE method, the computational time for testing one chip under four modes at a 1-Hz frequency resolution and 600-Hz bandwidth was dramatically reduced from 10 min to 6 s. A multifrequency signal with an equal amplitude and initial linear-phase-difference distribution was generated to ensure test repeatability and accuracy. The current test system based on LabVIEW using the SFE method was modified to use the MFE method without any hardware changes. The experimental results verified that the MFE method can be an ideal solution for large-scale dynamic testing of gyroscope chips and gyroscopes.

  5. Bending-induced electromechanical coupling and large piezoelectric response in a micromachined diaphragm

    KAUST Repository

    Wang, Zhihong

    2013-11-04

    We investigated the dependence of electromechanical coupling and the piezoelectric response of a micromachined Pb(Zr 0.52 Ti 0.48)O 3 (PZT) diaphragm on its curvature by observing the impedance spectrum and central deflection responses to a small AC voltage. The curvature of the diaphragm was controlled by applying air pressure to its back. We found that a depolarized flat diaphragm does not initially exhibit electromechanical coupling or the piezoelectric response. However, upon the application of static air pressure to the diaphragm, both electromechanical coupling and the piezoelectric response can be induced in the originally depolarized diaphragm. The piezoelectric response increases as the curvature increases and a giant piezoelectric response can be obtained from a bent diaphragm. The obtained results clearly demonstrate that a high strain gradient in a diaphragm can polarize a PZT film through a flexoelectric effect, and that the induced piezoelectric response of the diaphragm can be controlled by adjusting its curvature.

  6. CLASP (Capture and Locking alignment Spring Positioner): A micromachined fiber auto-positioning device

    Energy Technology Data Exchange (ETDEWEB)

    Kravitz, S.H.; word, J.C.; Bauer, T.M.; Seigal, P.K.; Armendariz, M.G.

    1996-03-01

    This work provides a method of mechanical alignment of an array of single mode fibers to an array of optical devices. The technique uses a micromachined metal spring, which captures a vertical, pre- positioned fiber, moves it into accurate alignment, and holds it for attachment. The spring is fabricated from electroplated mickel, using photodefined polyimide as a plating mask. The nickel is plated about 80 {mu}m thick, so that a large fiber depth is captured. In one application, the nickel springs can be aligned to optics on the back side of the substrate. This entire concept is referred to as CLASP (Capture and Locking Alignment Spring Positioner). These springs can be used for general alignment and capture of any fiber to any optical input or output device. Passive alignment of fiber arrays to {plus}/{minus} 2{mu}m accuracy has been demonstrated, with a clear path to improved accuracy.

  7. Material problems in high temperature corrosive environments and their solution by surface technologies

    International Nuclear Information System (INIS)

    Anzai, Toshio; Shibata, Keiichi

    1992-01-01

    The materials for high temperature facilities are usually determined by the heat resistant strength except special corrosive environment. High temperature corrosion has been considered in the case of using low quality fuel which is avoided recently. Even though fuel is clean, high temperature corrosion occurs due to the rise of design temperature and the intake of sea salt particles. There is also one more high temperature corrosion problem on process side that consumes heat energy. The research on high temperature corrosion is important for realizing new energy system such as molten carbonate type fuel cell, pulverized coal-firing supercritical power generation and high temperature gas-cooled nuclear reactor. In this report, the examples experienced actually in a chemical plant are examined, and the possibility of material technology against high temperature corrosion is reviewed. Corrosion phenomena in high temperature environment, the examples of corrosion in the high temperature facilities in a chemical plant and the material technology as the countermeasures for corrosion prevention are reported. (K.I.)

  8. Removal of organic micropollutants in surface and groundwater using advanced oxidation technologies

    Energy Technology Data Exchange (ETDEWEB)

    Urkiaga, A.; Barcena, L.; Fuentes, L. de las [GAIKER Technological Centre, Parque Tecnologico, Zamudio (Bizkaia) (Spain)

    2003-07-01

    Today more than ever, there is a public concern about the importance of having water of proven quality, as urban and industrial development are highly dependent on an abundant and safe water supply. Traces of organic micropollutants have been found in natural and drinking water. Some of these water pollutants have teratogenic, mutagenic or carcinogenic effects even in minimal quantities (ppb) so actual regulations, the water framework directive 2000/60/CE and the drinking water directive (98/83/CE), have established new and more stringent standards. Emerging technologies as the advanced oxidation processes (AOPs) are expanding as very promising technologies to remove these compounds and consequently to obtain water of high quality. In this work, several compounds representing different micropollutant groups were selected: VOCs (TCE), gasoline derivatives (MTBE), pesticides and other endocrine disruptors (PCBs and Bisphenol-A). The viability of using advanced oxidation processes to eliminate these different compounds was evaluated. The efficiency of the removal has been proven, however to fulfil with the legislation limits a polishing step would be needed in most cases. Although very high removals have been obtained for the different compounds, mineralisation rates have been quite lower and intermediate compounds have been detected. Consequently, higher mineralisation rates and a more profusely study of the effects of the generated intermediates would be needed. (orig.)

  9. Seismic Technology Adapted to Analyzing and Developing Geothermal Systems Below Surface-Exposed High-Velocity Rocks Final Report

    Energy Technology Data Exchange (ETDEWEB)

    Hardage, Bob A. [Univ. of Texas, Austin, TX (United States). Bureau of Economic Geology; DeAngelo, Michael V. [Univ. of Texas, Austin, TX (United States). Bureau of Economic Geology; Ermolaeva, Elena [Univ. of Texas, Austin, TX (United States). Bureau of Economic Geology; Hardage, Bob A. [Univ. of Texas, Austin, TX (United States). Bureau of Economic Geology; Remington, Randy [Univ. of Texas, Austin, TX (United States). Bureau of Economic Geology; Sava, Diana [Univ. of Texas, Austin, TX (United States). Bureau of Economic Geology; Wagner, Donald [Univ. of Texas, Austin, TX (United States). Bureau of Economic Geology; Wei, Shuijion [Univ. of Texas, Austin, TX (United States). Bureau of Economic Geology

    2013-02-01

    The objective of our research was to develop and demonstrate seismic data-acquisition and data-processing technologies that allow geothermal prospects below high-velocity rock outcrops to be evaluated. To do this, we acquired a 3-component seismic test line across an area of exposed high-velocity rocks in Brewster County, Texas, where there is high heat flow and surface conditions mimic those found at numerous geothermal prospects. Seismic contractors have not succeeded in creating good-quality seismic data in this area for companies who have acquired data for oil and gas exploitation purposes. Our test profile traversed an area where high-velocity rocks and low-velocity sediment were exposed on the surface in alternating patterns that repeated along the test line. We verified that these surface conditions cause non-ending reverberations of Love waves, Rayleigh waves, and shallow critical refractions to travel across the earth surface between the boundaries of the fast-velocity and slow-velocity material exposed on the surface. These reverberating surface waves form the high level of noise in this area that does not allow reflections from deep interfaces to be seen and utilized. Our data-acquisition method of deploying a box array of closely spaced geophones allowed us to recognize and evaluate these surface-wave noise modes regardless of the azimuth direction to the surface anomaly that backscattered the waves and caused them to return to the test-line profile. With this knowledge of the surface-wave noise, we were able to process these test-line data to create P-P and SH-SH images that were superior to those produced by a skilled seismic data-processing contractor. Compared to the P-P data acquired along the test line, the SH-SH data provided a better detection of faults and could be used to trace these faults upward to the boundaries of exposed surface rocks. We expanded our comparison of the relative value of S-wave and P-wave seismic data for geothermal

  10. AAtS over AeroMACS Technology Trials on the Airport Surface

    Science.gov (United States)

    Apaza, Rafael; Abraham, Biruk; Maeda, Toshihide

    2016-01-01

    Air-Ground component of SWIM; Enables enhanced two-way information exchanges between flight operators, aircrew, and ATSP (TFM); Used in all flight domains including pre-departure and post-arrival; Aircrew active in CDM; For strategic planning, advisory information; Not for command control (data voice) Wireless communications system for airport surface; Family member of Mobile WiMAX: (IEEE802.16e), Band 5091-5150 MHz, Bandwidth 5 MHz - TDDOFDMA - Adaptive Modulation and Coding - Quality of Service (QoS)

  11. Research on Laser Micro Polishing of SLS Technology Sintered Iron-Based Powder Surface

    Directory of Open Access Journals (Sweden)

    Gerda Vaitkūnaitė

    2015-03-01

    Full Text Available The article analyzes laser micro polishing of 1.2083 steel samples produced applying selective laser sintering (SLS method. The study has evaluated the distribution of the shape, size and temperature of the laser beam treated area in the surface layer of sintered and laser polished samples. Experimental tests have shown the impact of the technical parameters of laser micro polishing on the width and hardness of the impact zone of the treated sample. The microstructure analysis of laser treated and untreated areas of the material has been made.

  12. Prediction Surface Morphology of Nanostructure Fabricated by Nano-Oxidation Technology

    OpenAIRE

    Huang, Jen-Ching; Chang, Ho; Kuo, Chin-Guo; Li, Jeen-Fong; You, Yong-Chin

    2015-01-01

    Atomic force microscopy (AFM) was used for visualization of a nano-oxidation technique performed on diamond-like carbon (DLC) thin film. Experiments of the nano-oxidation technique of the DLC thin film include those on nano-oxidation points and nano-oxidation lines. The feature sizes of the DLC thin film, including surface morphology, depth, and width, were explored after application of a nano-oxidation technique to the DLC thin film under different process parameters. A databank for process ...

  13. A three-mask process for fabricating vacuum-sealed capacitive micromachined ultrasonic transducers using anodic bonding.

    Science.gov (United States)

    Yamaner, F Yalçın; Zhang, Xiao; Oralkan, Ömer

    2015-05-01

    This paper introduces a simplified fabrication method for vacuum-sealed capacitive micromachined ultrasonic transducer (CMUT) arrays using anodic bonding. Anodic bonding provides the established advantages of wafer-bondingbased CMUT fabrication processes, including process simplicity, control over plate thickness and properties, high fill factor, and ability to implement large vibrating cells. In addition to these, compared with fusion bonding, anodic bonding can be performed at lower processing temperatures, i.e., 350°C as opposed to 1100°C; surface roughness requirement for anodic bonding is more than 10 times more relaxed, i.e., 5-nm rootmean- square (RMS) roughness as opposed to 0.5 nm for fusion bonding; anodic bonding can be performed on smaller contact area and hence improves the fill factor for CMUTs. Although anodic bonding has been previously used for CMUT fabrication, a CMUT with a vacuum cavity could not have been achieved, mainly because gas is trapped inside the cavities during anodic bonding. In the approach we present in this paper, the vacuum cavity is achieved by opening a channel in the plate structure to evacuate the trapped gas and subsequently sealing this channel by conformal silicon nitride deposition in the vacuum environment. The plate structure of the fabricated CMUT consists of the single-crystal silicon device layer of a silicon-on-insulator wafer and a thin silicon nitride insulation layer. The presented fabrication approach employs only three photolithographic steps and combines the advantages of anodic bonding with the advantages of a patterned metal bottom electrode on an insulating substrate, specifically low parasitic series resistance and low parasitic shunt capacitance. In this paper, the developed fabrication scheme is described in detail, including process recipes. The fabricated transducers are characterized using electrical input impedance measurements in air and hydrophone measurements in immersion. A representative

  14. Entry, Descent, and Landing Technology Concept Trade Study for Increasing Payload Mass to the Surface of Mars

    Science.gov (United States)

    Cruz, Juan R.; Cianciolo, Alicia D.; Powell, Richard W.; Simonsen, Lisa C.; Tolson, Robert H.

    2005-01-01

    A trade study was conducted that compared various entry, descent, and landing technologies and concepts for placing an 1,800 kg payload on the surface of Mars. The purpose of this trade study was to provide data, and make recommendations, that could be used in making decisions regarding which new technologies and concepts should be pursued. Five concepts were investigated, each using a different combination of new technologies: 1) a Baseline concept using the least new technologies, 2) Aerocapture and Entry from Orbit, 3) Inflatable Aeroshell, 4) Mid L/D Aeroshell-A (high ballistic coefficient), and 5) Mid L/D Aeroshell-B (low ballistic coefficient). All concepts were optimized to minimize entry mass subject to a common set of key requirements. These key requirements were: A) landing a payload mass of 1,800 kg, B) landing at an altitude 2.5 km above the MOLA areoid, C) landing with a descent rate of 2.5 m/s, and D) using a single launch vehicle available within the NASA Expendable Launch Vehicle Contract without resorting to in-space assembly. Additional constraints were implemented, some common to all concepts and others specific to the new technologies used. Among the findings of this study are the following observations. Concepts using blunt-body aeroshells (1, 2, and 3 above) had entry masses between 4,028 kg and 4,123 kg. Concepts using mid L/D aeroshells (4 and 5 above) were significantly heavier with entry masses of 5,292 kg (concept 4) and 4,812 kg (concept 5). This increased weight was mainly due to the aeroshell. Based on a comparison of the concepts it was recommended that: 1) re-qualified and/or improved TPS materials be developed, 2) large subsonic parachutes be qualified. Aerocapture was identified as a promising concept, but system issues beyond the scope of this study need to be investigated. Inflatable aeroshells were identified as a promising new technology, but they require additional technology maturation work. For the class of missions

  15. Prospects for the Development of Innovative Technology of Supersonic Gas-Powder Surfacing Coatings from Alloys of the System Ni-Cr-B-Si

    Science.gov (United States)

    Radchenko, Mikhail V.; Kiselev, Vadim S.; Shevtsov, Yuri O.; Radchenko, Tatyana B.

    2017-10-01

    The article is devoted to the research and development of technological recommendations of supersonic gas-powder surfacing, an example of the practical use of the developed technology is given. Market research indicates that demand for these products is stable due to the growing quality requirements of components and parts produced by the largest machine-building enterprises of Russia.

  16. Hybrid tooling technologies and standardization for the manufacturing of inserts for micro injection molding

    DEFF Research Database (Denmark)

    Tosello, Guido; Fillon, Bertrand; Azcarate, Sabino

    2007-01-01

    . A metrological approach was applied to standardize the employed tooling processes (micro milling, µEDM, laser micromachining, electrochemical µ-milling). The micro tools were then tested with different polymers (PP, PP + nano fillers, PC, COC). The paper provides a comparison of these technologies concerning...

  17. Technology

    Directory of Open Access Journals (Sweden)

    Xu Jing

    2016-01-01

    Full Text Available The traditional answer card reading method using OMR (Optical Mark Reader, most commonly, OMR special card special use, less versatile, high cost, aiming at the existing problems proposed a method based on pattern recognition of the answer card identification method. Using the method based on Line Segment Detector to detect the tilt of the image, the existence of tilt image rotation correction, and eventually achieve positioning and detection of answers to the answer sheet .Pattern recognition technology for automatic reading, high accuracy, detect faster

  18. Surface Contaminant Control Technologies to Improve Laser Damage Resistance of Optics

    Directory of Open Access Journals (Sweden)

    Xiaofeng Cheng

    2014-01-01

    Full Text Available The large high-power solid lasers, such as the National Ignition Facility (NIF of America and the Shenguang-III (SG-III laser facility of China, can output over 2.1 MJ laser pulse for the inertial confinement fusion (ICF experiments. Because of the enhancement of operating flux and the expansion of laser driver scale, the problem of contamination seriously influences their construction period and operation life. During irradiation by intense laser beams, the contaminants on the metallic surface of beam tubes can be transmitted to the optical surfaces and lead to damage of optical components. For the high-power solid-state laser facilities, contamination control focuses on the slab amplifiers, spatial filters, and final-optical assemblies. In this paper, an effective solution to control contaminations including the whole process of the laser driver is put forward to provide the safe operation of laser facilities, and the detailed technical methods of contamination control such as washing, cleanliness metrology, and cleanliness protecting are also introduced to reduce the probability of laser-induced damage of optics. The experimental results show that the cleanliness level of SG-III laser facility is much better to ensure that the laser facility can safely operate at high energy flux.

  19. NOνA detector technology with initial performance from the surface prototype

    Science.gov (United States)

    Muether, Mathew

    2013-02-01

    NOνA, the NuMI Off-Axis νe Appearance experiment, will study νμ → νe oscillations characterized by the mixing angle θ13. Provided θ13 is large enough, NOνA may ultimately determine the ordering of the neutrino masses and measure CP violation in neutrino oscillations. A complementary pair of detectors will be constructed ~14 mrad off beam axis to optimize the energy profile of the neutrinos. This system consists of a surface based 14 kTon liquid scintillatior tracking volume located 810 km from the main injector source (NuMI) in Ash River, Minnesota and a smaller underground 222 Ton near detector at the Fermilab. The first neutrino signals at the Ash River Site are expected prior to the 2012 accelerator shutdown. In the meantime, a near detector surface prototype has been completed and neutrinos from two Fermilab sources have been observed using the same highly segmented PVC and liquid scintillator detector system that will be deployed in the full scale experiment. Design and initial performance characteristics of this prototype system are being fed back into the design for the full NOνA program.

  20. Surface reflectance and conversion efficiency dependence of technologies for mitigating global warming

    Energy Technology Data Exchange (ETDEWEB)

    Edmonds, Ian [Solartran Pty Ltd., 12 Lentara St, Kenmore, Brisbane 4069 (Australia); Smith, Geoff [Physics and Advanced Materials, University of Technology, Sydney, PO Box 123, Broadway, New South Wales 2007 (Australia)

    2011-05-15

    A means of assessing the relative impact of different renewable energy technologies on global warming has been developed. All power plants emit thermal energy to the atmosphere. Fossil fuel power plants also emit CO{sub 2} which accumulates in the atmosphere and provides an indirect increase in global warming via the greenhouse effect. A fossil fuel power plant may operate for some time before the global warming due to its CO{sub 2} emission exceeds the warming due to its direct heat emission. When a renewable energy power plant is deployed instead of a fossil fuel power plant there may be a significant time delay before the direct global warming effect is less than the combined direct and indirect global warming effect from an equivalent output coal fired plant - the ''business as usual'' case. Simple expressions are derived to calculate global temperature change as a function of ground reflectance and conversion efficiency for various types of fossil fuelled and renewable energy power plants. These expressions are used to assess the global warming mitigation potential of some proposed Australian renewable energy projects. The application of the expressions is extended to evaluate the deployment in Australia of current and new geo-engineering and carbon sequestration solutions to mitigate global warming. Principal findings are that warming mitigation depends strongly on the solar to electric conversion efficiency of renewable technologies, geo-engineering projects may offer more economic mitigation than renewable energy projects and the mitigation potential of reforestation projects depends strongly on the location of the projects. (author)