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Sample records for surface micromachining technology

  1. Multi-layer enhancement to polysilicon surface-micromachining technology

    Energy Technology Data Exchange (ETDEWEB)

    Sniegowski, J.J.; Rodgers, M.S. [Sandia National Labs., Albuquerque, NM (United States). Intelligent Micromachine Dept.

    1997-10-01

    A multi-level polysilicon surface-micromachining technology consisting of 5 layers of polysilicon is presented. Surface topography and film mechanical stress are the major impediments encountered in the development of a multilayer surface-micromachining process. However, excellent mechanical film characteristics have been obtained through the use of chemical-mechanical polishing for planarization of topography and by proper sequencing of film deposition with thermal anneals. Examples of operating microactuators, geared power-transfer mechanisms, and optical elements demonstrate the mechanical advantages of construction with 5 polysilicon layers.

  2. Manufacturing microsystems-on-a-chip with 5-level surface micromachining technology

    Energy Technology Data Exchange (ETDEWEB)

    Sniegowski, J.; Rodgers, M.S.

    1998-05-01

    An agile microsystem manufacturing technology has been developed that provides unprecedented 5 levels of independent polysilicon surface-micromachine films for the designer. Typical surface-micromachining processes offer a maximum of 3 levels, making this the most complex surface-micromachining process technology developed to date. Leveraged from the extensive infrastructure present in the microelectronics industry, the manufacturing method of polysilicon surface-micromachining offers similar advantages of high-volume, high-reliability, and batch-fabrication to microelectromechanical systems (MEMS) as has been accomplished with integrated circuits (ICs). These systems, comprised of microscopic-sized mechanical elements, are laying the foundation for a rapidly expanding, multi-billion dollar industry 2 which impacts the automotive, consumer product, and medical industries to name only a few.

  3. Macrodesign for microdevices: Polysilicon surface-micromachining technology, applications and issues

    Energy Technology Data Exchange (ETDEWEB)

    Sniegowski, J.J. [Sandia National Labs., Albuquerque, NM (United States). Intelligent Micromachine Dept.

    1997-05-01

    The intent of this tutorial is to overview the technology of multi-level polysilicon surface micromachining, to present examples of devices which fully utilize this level of complexity, and to discuss what they believe to be significant issues which are not fully resolved. Following this intent, the tutorial consists of four sections. The first is an introduction and description of multi-level polysilicon surface micromachining and its potential benefits. Specifically, the inclusion of a third deposited layer of mechanical polysilicon greatly extends the degree of complexity available for micromechanism design. The second section introduces wafer planarization by CMP as a process tool for surface micromachining. The third section presents examples of actuated geared micromechanisms which require the multi-level fabrication process. Demonstration of actuation mechanisms coupled to external devices are illustrated. Finally, polysilicon surface micromachining fabrication technology has reached a level where many device designs, for the most part, can be embodied in the technology to produce a mechanical construct which provides the desired function. When designed properly, the fabricated mechanical element, if free to operate, will produce the desired function. However, one set of issues which can hinder or prevent operation are related to the post-fabricated device surfaces. These surface issues; namely, stiction, friction, and wear, are emphasized in the final section as a major hindrance to realizing the full potential of surface micromachined devices.

  4. A manufacturing method for multi-layer polysilicon surface-micromachining technology

    Energy Technology Data Exchange (ETDEWEB)

    Sniegowski, J.J.; Rodgers, M.S.

    1998-01-01

    An advanced manufacturing technology which provides multi-layered polysilicon surface micromachining technology for advanced weapon systems is presented. Specifically, the addition of another design layer to a 4 levels process to create a 5 levels process allows consideration of fundamentally new architecture in designs for weapon advanced surety components.

  5. Stiction in surface micromachining

    NARCIS (Netherlands)

    Tas, Niels Roelof; Sonnenberg, A.H.; Jansen, Henricus V.; Legtenberg, R.; Legtenberg, Rob; Elwenspoek, Michael Curt

    1996-01-01

    Due to the smoothness of the surfaces in surface micromachining, large adhesion forces between fabricated structures and the substrate are encountered. Four major adhesion mechanisms have been analysed: capillary forces, hydrogen bridging, electrostatic forces and van der Waals forces. Once contact

  6. PECVD silicon carbide surface micromachining technology and selected MEMS applications

    NARCIS (Netherlands)

    Rajaraman, V.; Pakula, L.S.; Yang, H.; French, P.J.; Sarro, P.M.

    2011-01-01

    Attractive material properties of plasma enhanced chemical vapour deposited (PECVD) silicon carbide (SiC) when combined with CMOS-compatible low thermal budget processing provides an ideal technology platform for developing various microelectromechanical systems (MEMS) devices and merging them with

  7. The Development of Micromachined Gyroscope Structure and Circuitry Technology

    Directory of Open Access Journals (Sweden)

    Dunzhu Xia

    2014-01-01

    Full Text Available This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs, piezoelectric vibrating gyroscopes (PVGs, surface acoustic wave (SAW gyroscopes, bulk acoustic wave (BAW gyroscopes, micromachined electrostatically suspended gyroscopes (MESGs, magnetically suspended gyroscopes (MSGs, micro fiber optic gyroscopes (MFOGs, micro fluid gyroscopes (MFGs, micro atom gyroscopes (MAGs, and special micromachined gyroscopes. Next, the control electronics of micromachined gyroscopes are analyzed. The control circuits are categorized into typical circuitry and special circuitry technologies. The typical circuitry technologies include typical analog circuitry and digital circuitry, while the special circuitry consists of sigma delta, mode matching, temperature/quadrature compensation and novel special technologies. Finally, the characteristics of various typical gyroscopes and their development tendency are discussed and investigated in detail.

  8. Condensation of sodium on a micromachined surface for AMTEC

    International Nuclear Information System (INIS)

    Crowley, C.J.; Izenson, M.G.

    1993-01-01

    A novel condenser component is being developed to enable Alkali Metal Thermal to Electric Conversion (AMTEC) technology to achieve two critical goals: (1) optimization of conversion efficiency and (2) microgravity fluid management. The first goal is achieved by minimizing parasitic radiation heat transfer losses for condensers with a large view factor to the high-temperature β double-prime-alumina surface. The condenser geometry includes a specially designed, micromachined surface where large capillary forces are used to manage the fluid distribution to accomplish the second goal. We present and discuss the results of separate effects experiments investigating the wetting and condensation behavior of sodium on this capillary surface. Test results show that the micromachined surface maintains a smooth, high reflective film of liquid sodium on the surface, which implies reduced parasitic losses and increased conversion efficiencies in AMTEC cells. Accomplishing this in an adverse gravity gradient demonstrates the potential for management of the fluid even under spacecraft acceleration conditions

  9. Design of Surface micromachined Compliant MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Bradley, Joe Anthony [Iowa State Univ., Ames, IA (United States)

    2001-01-01

    The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a micro-compliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMS, most have used comb-drive actuation methods and bulk micromachining processes. This research focuses on fully-compliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms.

  10. Design of Surface Micromachined Compliant MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Bradley, Joe Anthony [Iowa State Univ., Ames, IA (United States)

    2002-12-31

    The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a micro-compliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMs, most have used comb-drive actuation methods and bulk micromachining processes. This research focused on fully-compliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms.

  11. Silicon Micromachines for Science and Technology

    International Nuclear Information System (INIS)

    Bishop, David J.

    2002-01-01

    The era of silicon micromechanics is upon us. In areas as diverse as telecommunications, automotive, aerospace, chemistry, entertainment and basic science, the ability to build microscopic machines from silicon is having a revolutionary impact. In my talk, I will discuss what micromachines are, how they are built and show examples of how they will have a revolutionary impact in many areas of science as well as technology.

  12. FY 1998 report on the R and D of micromachine technology. R and D of micromachine technology; 1998 nendo micromachine gijutsu no kenkyu kaihatsu seika hokokusho

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    2000-03-01

    In the comprehensive investigational study of micromachine technology, the paper aims at clarifying the improvement of functional devices and the future development of micromachine technology for establishment of the technology needed to realize a micromachine system composing of small-functional elements for conducting diagnosis/cure/repair, movement and independent work in small portions in living organism, disaster site, etc. and a medical-use micromachine system to analyze/react on a trace of liquid. In this fiscal year, the following were carried out: 1) study of micromachine systems, 2) study of a medical-use micromachine system to analyze/react on a trace liquid, and 3) comprehensive investigational study. In 1), studies were made toward the minuteness and improvement of micro laser catheter and micro tactile sensor catheter as functional devices which become the main components of micro catheter for cerebrovascular diagnosis/therapy use and toward the minuteness and improvement of disaster relief use micromachine system. In 2), study was made of element technology of a micro-machine system having functions of sampling/analysis/reaction of a trace of liquid. (NEDO)

  13. X-ray microcalorimeter arrays fabricated by surface micromachining

    International Nuclear Information System (INIS)

    Hilton, G.C.; Beall, J.A.; Deiker, S.; Vale, L.R.; Doriese, W.B.; Beyer, Joern; Ullom, J.N.; Reintsema, C.D.; Xu, Y.; Irwin, K.D.

    2004-01-01

    We are developing arrays of Mo/Cu transition edge sensor-based detectors for use as X-ray microcalorimeters and sub-millimeter bolometers. We have fabricated 8x8 pixel X-ray microcalorimeter arrays using surface micromachining. Surface-micromachining techniques hold the promise of scalability to much larger arrays and may allow for the integration of in-plane multiplexer elements. In this paper we describe the surface micromachining process and recent improvements in the device geometry that provide for increased mechanical strength. We also present X-ray and heat pulse spectra collected using these detectors

  14. Advanced technology trend survey of micromachines in Europe; Oshu ni okeru micromachine sentan gijutsu doko chosa

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1996-02-01

    In this research survey, the development trend of micromachine technology in Europe was surveyed, development level of micromachine technology of European companies was grasped, and practical application fields of their target were investigated. Technology development level of private companies in Japan`s national projects and practical application fields of Japan`s target were arranged. Trends of micromachine technology development are compared between Japanese companies and European companies. Among micromachine technology development projects in Europe, ``8520 MUST`` is a part of the ESPRIT Project. About 40,000 companies among about 170,000 companies in whole Europe are relating to the MUST Project. The main fields include the manufacturing technology, process control of machines, technology of safety, sensor technology in environmental fields, and automotive technology. The marketing fields of application include the automobile, military technology, home automation, industrial process, medical technology, environmental technology, and games. The results can be compared with the direction of research and development in Japan. 22 figs., 8 tabs.

  15. A micromachined surface stress sensor with electronic readout

    NARCIS (Netherlands)

    Carlen, Edwin; Weinberg, M.S.; Zapata, A.M.; Borenstein, J.T.

    2008-01-01

    A micromachined surface stress sensor has been fabricated and integrated off chip with a low-noise, differential capacitance, electronic readout circuit. The differential capacitance signal is modulated with a high frequency carrier signal, and the output signal is synchronously demodulated and

  16. Optofluidic Microlasers based on Femtosecond Micromachining Technology

    Directory of Open Access Journals (Sweden)

    Simoni F.

    2017-08-01

    Full Text Available We present the different optofluidic lasers which have been realized using the Femtosecond Micromachining technique to fabricate the monolithic optofluidic structures in glass chips. We show how the great flexibility of this 3D technique allows getting different kind of optical cavities. The most recent devices fabricated by this technique as ring shaped and Fabry-Perot resonators show excellent emission performances.We also point out how the addition of the inkjet printing technique provides further opportunities in realizing optofluidic chips.

  17. Development of a Surface Micromachined On-Chip Flat Disk Micropump

    Directory of Open Access Journals (Sweden)

    M. I. KILANI

    2009-08-01

    Full Text Available The paper presents research progress in the development of a surface micromachined flat disk micropump which employs the viscous and centrifugal effects acting on a layer of fluid sandwiched between a rotating flat disk and a stationary plate. The pump is fabricated monolithically on-chip using Sandia’s Ultraplanar Multilevel MEMS Technology (SUMMiT™ where an electrostatic comb-drive Torsional Ratcheting Actuator (TRA drives the flat disk through a geared transmission. The paper reviews available analytical models for flow geometries similar to that of the described pump, and presents a set of experiments which depict its performance and possible failure modes. Those experiments highlight future research directions in the development of electrostatically-actuated, CMOS-compatible, surface micromachined pumps.

  18. Fabrication of piezoresistive microcantilever using surface micromachining technique for biosensors

    Energy Technology Data Exchange (ETDEWEB)

    Na, Kwang-Ho [Department of Electrical Engineering and Nano-Bio Research Center, Myongji University, Yongin, Gyeonggido 449-728 (Korea, Republic of); Kim, Yong-Sang [Department of Electrical Engineering and Nano-Bio Research Center, Myongji University, Yongin, Gyeonggido 449-728 (Korea, Republic of); Kang, C.J. [Department of Physics and Nano-Bio Research Center, Myongji University, San38-2 Namdong, Yongin, Gyeonggido 449-728 (Korea, Republic of)]. E-mail: cjkang@mju.ac.kr

    2005-11-15

    A microcantilever-based biosensor with piezoresistor has been fabricated using surface micromachining technique, which is cost effective and simplifies a fabrication procedure. In order to evaluate the characteristics of the cantilever, the cystamine terminated with thiol was covalently immobilized on the gold-coated side of the cantilever and glutaraldehyde that would be bonded with amine group in the cystamine was injected subsequently. This process was characterized by measuring the deflection of the cantilever in real time monitoring. Using a piezoresistive read-out and a well-known optical beam deflection method as well, the measurement of deflection was carried out. The sensitivity of piezoresistive method is good enough compared with that of optical beam deflection method.

  19. Surface micromachined counter-meshing gears discrimination device

    Science.gov (United States)

    Polosky, Marc A.; Garcia, Ernest J.; Allen, James J.

    2000-12-12

    A surface micromachined Counter-Meshing Gears (CMG) discrimination device which functions as a mechanically coded lock. Each of two CMG has a first portion of its perimeter devoted to continuous driving teeth that mesh with respective pinion gears. Each EMG also has a second portion of its perimeter devoted to regularly spaced discrimination gear teeth that extend outwardly on at least one of three levels of the CMG. The discrimination gear teeth are designed so as to pass each other without interference only if the correct sequence of partial rotations of the CMG occurs in response to a coded series of rotations from the pinion gears. A 24 bit code is normally input to unlock the device. Once unlocked, the device provides a path for an energy or information signal to pass through the device. The device is designed to immediately lock up if any portion of the 24 bit code is incorrect.

  20. Surface micromachined counter-meshing gears discrimination device

    International Nuclear Information System (INIS)

    Polosky, M.A.; Garcia, E.J.; Allen, J.J.

    1998-01-01

    This paper discusses the design, fabrication and testing of a surface micromachined Counter-Meshing Gears (CMG) discrimination device which functions as a mechanically coded lock, A 24 bit code is input to unlock the device. Once unlocked, the device provides a path for an energy or information signal to pass through the device. The device is designed to immediately lock up if any portion of the 24 bit code is incorrect. The motivation for the development of this device is based on occurrences referred to as High Consequence Events, A High Consequence Event is an event where an inadvertent operation of a system could result in the catastrophic loss of life, property, or damage to the environment

  1. Ultrafast disk technology enables next generation micromachining laser sources

    Science.gov (United States)

    Heckl, Oliver H.; Weiler, Sascha; Luzius, Severin; Zawischa, Ivo; Sutter, Dirk

    2013-02-01

    Ultrashort pulsed lasers based on thin disk technology have entered the 100 W regime and deliver several tens of MW peak power without chirped pulse amplification. Highest uptime and insensitivity to back reflections make them ideal tools for efficient and cost effective industrial micromachining. Frequency converted versions allow the processing of a large variety of materials. On one hand, thin disk oscillators deliver more than 30 MW peak power directly out of the resonator in laboratory setups. These peak power levels are made possible by recent progress in the scaling of the pulse energy in excess of 40 μJ. At the corresponding high peak intensity, thin disk technology profits from the limited amount of material and hence the manageable nonlinearity within the resonator. Using new broadband host materials like for example the sesquioxides will eventually reduce the pulse duration during high power operation and further increase the peak power. On the other hand industry grade amplifier systems deliver even higher peak power levels. At closed-loop controlled 100W, the TruMicro Series 5000 currently offers the highest average ultrafast power in an industry proven product, and enables efficient micromachining of almost any material, in particular of glasses, ceramics or sapphire. Conventional laser cutting of these materials often requires UV laser sources with pulse durations of several nanoseconds and an average power in the 10 W range. Material processing based on high peak power laser sources makes use of multi-photon absorption processes. This highly nonlinear absorption enables micromachining driven by the fundamental (1030 nm) or frequency doubled (515 nm) wavelength of Yb:YAG. Operation in the IR or green spectral range reduces the complexity and running costs of industrial systems initially based on UV light sources. Where UV wavelength is required, the TruMicro 5360 with a specified UV crystal life-time of more than 10 thousand hours of continues

  2. Performance Enhancement of the Patch Antennas Applying Micromachining Technology

    Directory of Open Access Journals (Sweden)

    Mohamed N. Azermanesh

    2007-09-01

    Full Text Available This paper reports on the application of micromachining technology for performance enhancement of two types of compact antennas which are becoming a common practice in microsystems. Shorted patch antennas (SPA and folded shorted patch antennas operating in the 5-6 GHz ISM band, with intended application in short-range wireless communications, are considered. The electrical length of antennas are modified by etching the substrate of the antennas, thus providing a new degree of freedom to control the antenna operating properties, which is the main novelty of our work. The gain and bandwidth of the antennas are increased by increasing the etching depth. However, etching the substrate affects the operating frequency as well. To keep the operating frequency at a pre-specified value, the dimension of the antennas must be increased by deepening the etching depth. Therefore, a trade off between the performance enhancement of the antennas and the dimensional enlargement is required.

  3. High definition surface micromachining of LiNbO 3 by ion implantation

    Science.gov (United States)

    Chiarini, M.; Bentini, G. G.; Bianconi, M.; De Nicola, P.

    2010-10-01

    High Energy Ion Implantation (HEII) of both medium and light mass ions has been successfully applied for the surface micromachining of single crystal LiNbO 3 (LN) substrates. It has been demonstrated that the ion implantation process generates high differential etch rates in the LN implanted areas, when suitable implantation parameters, such as ion species, fluence and energy, are chosen. In particular, when traditional LN etching solutions are applied to suitably ion implanted regions, etch rates values up to three orders of magnitude higher than the typical etching rates of the virgin material, are registered. Further, the enhancement in the etching rate has been observed on x, y and z-cut single crystalline material, and, due to the physical nature of the implantation process, it is expected that it can be equivalently applied also to substrates with different crystallographic orientations. This technique, associated with standard photolithographic technologies, allows to generate in a fast and accurate way very high aspect ratio relief micrometric structures on LN single crystal surface. In this work a description of the developed technology is reported together with some examples of produced micromachined structures: in particular very precisely defined self sustaining suspended structures, such as beams and membranes, generated on LN substrates, are presented. The developed technology opens the way to actual three dimensional micromachining of LN single crystals substrates and, due to the peculiar properties characterising this material, (pyroelectric, electro-optic, acousto-optic, etc.), it allows the design and the production of complex integrated elements, characterised by micrometric features and suitable for the generation of advanced Micro Electro Optical Systems (MEOS).

  4. Demonstration of robust micromachined jet technology and its application to realistic flow control problems

    Energy Technology Data Exchange (ETDEWEB)

    Chang, Sung Pil [Inha University, Incheon (Korea, Republic of)

    2006-04-15

    This paper describes the demonstration of successful fabrication and initial characterization of micromachined pressure sensors and micromachined jets (microjets) fabricated for use in macro flow control and other applications. In this work, the microfabrication technology was investigated to create a micromachined fluidic control system with a goal of application in practical fluids problems, such as UAV (Unmanned Aerial Vehicle)-scale aerodynamic control. Approaches of this work include : (1) the development of suitable micromachined synthetic jets (microjets) as actuators, which obviate the need to physically extend micromachined structures into an external flow ; and (2) a non-silicon alternative micromachining fabrication technology based on metallic substrates and lamination (in addition to traditional MEMS technologies) which will allow the realization of larger scale, more robust structures and larger array active areas for fluidic systems. As an initial study, an array of MEMS pressure sensors and an array of MEMS modulators for orifice-based control of microjets have been fabricated, and characterized. Both pressure sensors and modulators have been built using stainless steel as a substrate and a combination of lamination and traditional micromachining processes as fabrication technologies.

  5. Demonstration of robust micromachined jet technology and its application to realistic flow control problems

    International Nuclear Information System (INIS)

    Chang, Sung Pil

    2006-01-01

    This paper describes the demonstration of successful fabrication and initial characterization of micromachined pressure sensors and micromachined jets (microjets) fabricated for use in macro flow control and other applications. In this work, the microfabrication technology was investigated to create a micromachined fluidic control system with a goal of application in practical fluids problems, such as UAV (Unmanned Aerial Vehicle)-scale aerodynamic control. Approaches of this work include : (1) the development of suitable micromachined synthetic jets (microjets) as actuators, which obviate the need to physically extend micromachined structures into an external flow ; and (2) a non-silicon alternative micromachining fabrication technology based on metallic substrates and lamination (in addition to traditional MEMS technologies) which will allow the realization of larger scale, more robust structures and larger array active areas for fluidic systems. As an initial study, an array of MEMS pressure sensors and an array of MEMS modulators for orifice-based control of microjets have been fabricated, and characterized. Both pressure sensors and modulators have been built using stainless steel as a substrate and a combination of lamination and traditional micromachining processes as fabrication technologies

  6. Fiscal 1996 report on technological results. R and D on micromachine technology; 1996 nendo micromachine gijutsu no kenkyu kaihatsu seika hokokusho

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1998-03-01

    Researches on basic element technology of micromachines are conducted that operate autonomously in a narrow small part in a complicated apparatus or in vivo. The areas of activity are (1) research on micromachine systems, (2) a subminiature liquid synthesizing system, and (3) comprehensive investigation and research. In (1), the researches were carried out on the miniaturization and functional combination of a micro laser catheter and a micro tactile sensor catheter, which are the primary components of a coeliac diagnostic and therapeutic system, a 'micro catheter for cerebral blood vessel/treatment', as a micromachine system in the medical field. In (2), R and D was conducted on a system element technology assuming it contributed to a subminiature liquid synthesizing system capable of preparing various liquids including pharmaceuticals accurately with a trace amount. In (3), examination was made on the application area of a micromachine system with priority given to a medical field and also on technological subjects to be tapped, as well as on the contents of (2), with a device installed for evaluating the operating characteristic of a distribution type fluid actuator as needed for the development. (NEDO)

  7. Optical micro-metrology of structured surfaces micro-machined by jet-ECM

    DEFF Research Database (Denmark)

    Quagliotti, Danilo; Tosello, Guido; Islam, Aminul

    2015-01-01

    A procedure for statistical analysis and uncertainty evaluation is presented with regards to measurements of step height and surface texture. Measurements have been performed with a focus-variation microscope over jet electrochemical micro-machined surfaces. Traceability has been achieved using a...

  8. First reliability test of a surface micromachined microengine using SHiMMeR

    Energy Technology Data Exchange (ETDEWEB)

    Tanner, D.M.; Smith, N.F.; Bowman, D.J. [and others

    1997-08-01

    The first-ever reliability stress test on surface micromachined microengines developed at Sandia National Laboratories (SNL) has been completed. We stressed 41 microengines at 36,000 RPM and inspected the functionality at 60 RPM. We have observed an infant mortality region, a region of low failure rate (useful life), and no signs of wearout in the data. The reliability data are presented and interpreted using standard reliability methods. Failure analysis results on the stressed microengines are presented. In our effort to study the reliability of MEMS, we need to observe the failures of large numbers of parts to determine the failure modes. To facilitate testing of large numbers of micromachines. The Sandia High Volume Measurement of Micromachine Reliability (SHiMMeR) system has computer controlled positioning and the capability to inspect moving parts. The development of this parallel testing system is discussed in detail.

  9. Fabrication of surface micromachined ain piezoelectric microstructures and its potential apllication to rf resonators

    NARCIS (Netherlands)

    Saravanan, S.; Saravanan, S.; Berenschot, Johan W.; Krijnen, Gijsbertus J.M.; Elwenspoek, Michael Curt

    2005-01-01

    We report on a novel microfabrication method to fabricate aluminum nitride (AlN) piezoelectric microstructures down to 2 microns size by a surface micromachining process. Highly c-axis oriented AlN thin films are deposited between thin Cr electrodes on polysilicon structural layers by rf reactive

  10. Surface micromachined fabrication of piezoelectric ain unimorph suspension devices for rf resonator applications

    NARCIS (Netherlands)

    Saravanan, S.; Saravanan, S.; Berenschot, Johan W.; Krijnen, Gijsbertus J.M.; Elwenspoek, Michael Curt

    We report a surface micromachining process for aluminum nitride (AlN) thin films to fabricate piezoelectric unimorph suspension devices for actuator applications. Polysilicon is used as a structural layer. Highly c-axis oriented AlN thin films 1 /spl mu/m thick are deposited by rf reactive

  11. Effect of fluorocarbon self-assembled monolayer films on sidewall adhesion and friction of surface micromachines with impacting and sliding contact interfaces

    International Nuclear Information System (INIS)

    Xiang, H.; Komvopoulos, K.

    2013-01-01

    A self-assembled monolayer film consisting of fluoro-octyltrichlorosilane (FOTS) was vapor-phase deposited on Si(100) substrates and polycrystalline silicon (polysilicon) surface micromachines. The hydrophobic behavior and structural composition of the FOTS film deposited on Si(100) were investigated by goniometry and X-ray photoelectron spectroscopy, respectively. The effects of contact pressure, relative humidity, temperature, and impact/sliding cycles on the adhesive and friction behavior of uncoated and FOTS-coated polysilicon micromachines (referred to as the Si and FOTS/Si micromachines, respectively) were investigated under controlled loading and environmental conditions. FOTS/Si micromachines demonstrated much lower and stable adhesion than Si micromachines due to the highly hydrophobic and conformal FOTS film. Contrary to Si micromachines, sidewall adhesion of FOTS/Si micromachines demonstrated a weak dependence on relative humidity, temperature, and impact cycles. In addition, FOTS/Si micromachines showed low and stable adhesion and low static friction for significantly more sliding cycles than Si micromachines. The adhesive and static friction characteristics of Si and FOTS/Si micromachines are interpreted in the context of physicochemical surface changes, resulting in the increase of the real area of contact and a hydrophobic-to-hydrophilic transition of the surface chemical characteristics caused by nanoscale surface smoothening and the removal of the organic residue (Si micromachines) or the FOTS film (FOTS/Si micromachines) during repetitive impact and oscillatory sliding of the sidewall surfaces.

  12. Enhancing structural integrity of adhesive bonds through pulsed laser surface micro-machining

    KAUST Repository

    Diaz, Edwin Hernandez

    2015-06-01

    Enhancing the effective peel resistance of plastically deforming adhesive joints through laser-based surface micro-machining Edwin Hernandez Diaz Inspired by adhesion examples commonly found in nature, we reached out to examine the effect of different kinds of heterogeneous surface properties that may replicate this behavior and the mechanisms at work. In order to do this, we used pulsed laser ablation on copper substrates (CuZn40) aiming to increase adhesion for bonding. A Yb-fiber laser was used for surface preparation of the substrates, which were probed with a Scanning Electron Microscope (SEM) and X-ray Photoelectron Spectroscopy (XPS). Heterogeneous surface properties were devised through the use of simplified laser micromachined patterns which may induce sequential events of crack arrest propagation, thereby having a leveraging effect on dissipation. The me- chanical performance of copper/epoxy joints with homogeneous and heterogeneous laser micromachined interfaces was then analyzed using the T-peel test. Fractured surfaces were analyzed using SEM to resolve the mechanism of failure and adhesive penetration within induced surface asperities from the treatment. Results confirm positive modifications of the surface morphology and chemistry from laser ablation that enable mechanical interlocking and cohesive failure within the adhesive layer. Remarkable improvements of apparent peel energy, bond toughness, and effective peel force were appreciated with respect to sanded substrates as control samples.

  13. Fiscal 1997 report on technological results. R and D on micromachine technology; 1997 nendo micromachine gijutsu no kenkyu kaihatsu seika hokokusho

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1998-03-01

    Researches on basic element technology of micromachines are conducted that operate autonomously in a narrow small part in a complicated apparatus or in vivo. The areas of activity are 1. research on micromachine systems and 2. comprehensive investigation and research. In 1, (1) a micro catheter and (2) a micro tactile sensor catheter were studied while, in 2, basic technology and technological problems, particularly those problems concerning sophistication in the medical field were examined and studied. Further, in (1), with the purpose of developing a micro laser catheter for diagnosis/treatment, researches were implemented on the technology of integrating micro laser and an optical fiber which were components of the catheter and on the fabrication of the fine diameter of a micro catheter as well as on the characteristical improvement of the base body on which minute elements were mounted. In (2), characteristical improvement and sophistication were carried out for a high sensitivity contact pressure sensor and a diagnostic tactile sensor, which are mounted on a catheter having a positive bulge control mechanism for insertion into body cavity, with a sensor probe manufactured experimentally. (NEDO)

  14. Surface-micromachined rotatable member having a low-contact-area hub

    Science.gov (United States)

    Rodgers, M. Steven; Sniegowski, Jeffry J.; Krygowski, Thomas W.

    2003-11-18

    A surface-micromachined rotatable member formed on a substrate and a method for manufacturing thereof are disclosed. The surface-micromachined rotatable member, which can be a gear or a rotary stage, has a central hub, and an annulus connected to the central hub by an overarching bridge. The hub includes a stationary axle support attached to the substrate and surrounding an axle. The axle is retained within the axle support with an air-gap spacing therebetween of generally 0.3 .mu.m or less. The rotatable member can be formed by alternately depositing and patterning layers of a semiconductor (e.g. polysilicon or a silicon-germanium alloy) and a sacrificial material and then removing the sacrificial material, at least in part. The present invention has applications for forming micromechanical or microelectromechanical devices requiring lower actuation forces, and providing improved reliability.

  15. Surface--micromachined rotatable member having a low-contact-area hub

    Science.gov (United States)

    Rodgers, M. Steven; Sniegowski, Jeffry J.

    2002-01-01

    A surface-micromachined rotatable member formed on a substrate and a method for manufacturing thereof are disclosed. The surface-micromachined rotatable member, which can be a gear or a rotary stage, has a central hub, and an annulus connected to the central hub by an overarching bridge. The hub includes a stationary axle support attached to the substrate and surrounding an axle. The axle is retained within the axle support with an air-gap spacing therebetween of generally 0.3 .mu.m or less. The rotatable member can be formed by alternately depositing and patterning layers of a semiconductor (e.g. polysilicon or a silicon-germanium alloy) and a sacrificial material and then removing the sacrificial material, at least in part. The present invention has applications for forming micromechanical or microelectromechanical devices requiring lower actuation forces, and providing improved reliability.

  16. Demonstration of Robust Micromachined Jet Technology and its Application to Realistic Flow Control Problems

    National Research Council Canada - National Science Library

    Allen, Mark

    2000-01-01

    .... Our approaches include: (1) the development of suitable micromachined synthetic jets (microjets) as actuators, which obviate the need to physically extend micromachined structures into an external flow...

  17. A wafer mapping technique for residual stress in surface micromachined films

    International Nuclear Information System (INIS)

    Schiavone, G; Murray, J; Smith, S; Walton, A J; Desmulliez, M P Y; Mount, A R

    2016-01-01

    The design of MEMS devices employing movable structures is crucially dependant on the mechanical behaviour of the deposited materials. It is therefore important to be able to fully characterize the micromachined films and predict with confidence the mechanical properties of patterned structures. This paper presents a characterization technique that enables the residual stress in MEMS films to be mapped at the wafer level by using microstructures released by surface micromachining. These dedicated MEMS test structures and the associated measurement techniques are used to extract localized information on the strain and Young’s modulus of the film under investigation. The residual stress is then determined by numerically coupling this data with a finite element analysis of the structure. This paper illustrates the measurement routine and demonstrates it with a case study using electrochemically deposited alloys of nickel and iron, particularly prone to develop high levels of residual stress. The results show that the technique enables wafer mapping of film non-uniformities and identifies wafer-to-wafer differences. A comparison between the results obtained from the mapping technique and conventional wafer bow measurements highlights the benefits of using a procedure tailored to films that are non-uniform, patterned and surface-micromachined, as opposed to simple standard stress extraction methods. The presented technique reveals detailed information that is generally unexplored when using conventional stress extraction methods such as wafer bow measurements. (paper)

  18. Micromachined sensor and actuator research at Sandia`s Microelectronics Development Laboratory

    Energy Technology Data Exchange (ETDEWEB)

    Smith, J.H.

    1996-11-01

    An overview of the surface micromachining program at the Microelectronics Development Laboratory of Sandia National Laboratories is presented. Development efforts are underway for a variety of surface micromachined sensors and actuators for both defense and commercial applications. A technology that embeds micromechanical devices below the surface of the wafer prior to microelectronics fabrication has been developed for integrating microelectronics with surface-micromachined micromechanical devices. The application of chemical-mechanical polishing to increase the manufacturability of micromechanical devices is also presented.

  19. Effects of Micromachining Processes on Electro-Osmotic Flow Mobility of Glass Surfaces

    Directory of Open Access Journals (Sweden)

    Norihisa Miki

    2013-03-01

    Full Text Available Silica glass is frequently used as a device material for micro/nano fluidic devices due to its excellent properties, such as transparency and chemical resistance. Wet etching by hydrofluoric acid and dry etching by neutral loop discharge (NLD plasma etching are currently used to micromachine glass to form micro/nano fluidic channels. Electro-osmotic flow (EOF is one of the most effective methods to drive liquids into the channels. EOF mobility is affected by a property of the micromachined glass surfaces, which includes surface roughness that is determined by the manufacturing processes. In this paper, we investigate the effect of micromaching processes on the glass surface topography and the EOF mobility. We prepared glass surfaces by either wet etching or by NLD plasma etching, investigated the surface topography using atomic force microscopy, and attempted to correlate it with EOF generated in the micro-channels of the machined glass. Experiments revealed that the EOF mobility strongly depends on the surface roughness, and therefore upon the fabrication process used. A particularly strong dependency was observed when the surface roughness was on the order of the electric double layer thickness or below. We believe that the correlation described in this paper can be of great help in the design of micro/nano fluidic devices.

  20. Fibroblast adhesion and activation onto micro-machined titanium surfaces.

    Science.gov (United States)

    Guillem-Marti, J; Delgado, L; Godoy-Gallardo, M; Pegueroles, M; Herrero, M; Gil, F J

    2013-07-01

    Surface modifications performed at the neck of dental implants, in the manner of micro-grooved surfaces, can reduce fibrous tissue encapsulation and prevent bacterial colonization, thereby improving fibrointegration and the formation of a biological seal. However, the applied procedures are technically complex and/or time consuming methods. The aim of this study was to analyse the fibroblast behaviour on modified titanium surfaces obtained, applying a simple and low-cost method. An array of titanium surfaces was obtained using a commercial computerized numerical control lathe, modifying the feed rate and the cutting depth. To elucidate the potential ability of the generated surfaces to activate connective tissue cells, a thorough gene (by real time - qPCR) and protein (by western blot or zymography) expression and cellular response characterization (cell morphology, cell adhesion and cell activation by secreting extracellular matrix (ECM) components and their enzyme regulators) was performed. Micro-grooved surfaces have statistically significant differences in the groove's width (approximately 10, 50 and 100 μm) depending on the applied advancing fixed speed. Field emission scanning electron microscopy images showed that fibroblasts oriented along the generated grooves, but they were only entirely accommodated on the wider grooves (≥50 μm). Micro-grooved surfaces exhibited an earlier cell attachment and activation, as seen by collagen Iα1 and fibronectin deposition and activation of ECM remodelling enzymes, compared with the other surfaces. However, fibroblasts could remain in an activated state on narrower surfaces (fibrotic response. © 2012 John Wiley & Sons A/S.

  1. Fabrication of a Micromachined Capacitive Switch Using the CMOS-MEMS Technology

    Directory of Open Access Journals (Sweden)

    Cheng-Yang Lin

    2015-11-01

    Full Text Available The study investigates the design and fabrication of a micromachined radio frequency (RF capacitive switch using the complementary metal oxide semiconductor-microelectromechanical system (CMOS-MEMS technology. The structure of the micromachined switch is composed of a membrane, eight springs, four inductors, and coplanar waveguide (CPW lines. In order to reduce the actuation voltage of the switch, the springs are designed as low stiffness. The finite element method (FEM software CoventorWare is used to simulate the actuation voltage and displacement of the switch. The micromachined switch needs a post-CMOS process to release the springs and membrane. A wet etching is employed to etch the sacrificial silicon dioxide layer, and to release the membrane and springs of the switch. Experiments show that the pull-in voltage of the switch is 12 V. The switch has an insertion loss of 0.8 dB at 36 GHz and an isolation of 19 dB at 36 GHz.

  2. Channeling-based collimators for generation of microbeams produced by silicon micromachining technology

    International Nuclear Information System (INIS)

    Guidi, V.; Antonini, A.; Milan, E.; Ronzoni, A.; Martinelli, G.; Biryukov, V.M.; Chesnokov, Yu.A.

    2006-01-01

    The growing interest on micro-beams in recent years and the combined development of channeling technology in high-energy physics have opened the way to new concepts for micro-beams devices. Silicon micromachining technology is here applied to manufacture micro-collimators in inexpensive and feasible ways. Both dry and wet etchings can be employed for the purpose, though the latter technique appears to be cheaper and easier. Two designs for micro-collimator devices have been considered and preliminary samples have been produced accordingly

  3. Novel in situ mechanical testers to enable integrated metal surface micro-machines.

    Energy Technology Data Exchange (ETDEWEB)

    Follstaedt, David Martin; de Boer, Maarten Pieter; Kotula, Paul Gabriel; Hearne, Sean Joseph; Foiles, Stephen Martin; Buchheit, Thomas Edward; Dyck, Christopher William

    2005-10-01

    The ability to integrate metal and semiconductor micro-systems to perform highly complex functions, such as RF-MEMS, will depend on developing freestanding metal structures that offer improved conductivity, reflectivity, and mechanical properties. Three issues have prevented the proliferation of these systems: (1) warpage of active components due to through-thickness stress gradients, (2) limited component lifetimes due to fatigue, and (3) low yield strength. To address these issues, we focus on developing and implementing techniques to enable the direct study of the stress and microstructural evolution during electrodeposition and mechanical loading. The study of stress during electrodeposition of metal thin films is being accomplished by integrating a multi-beam optical stress sensor into an electrodeposition chamber. By coupling the in-situ stress information with ex-situ microstructural analysis, a scientific understanding of the sources of stress during electrodeposition will be obtained. These results are providing a foundation upon which to develop a stress-gradient-free thin film directly applicable to the production of freestanding metal structures. The issues of fatigue and yield strength are being addressed by developing novel surface micromachined tensile and bend testers, by interferometry, and by TEM analysis. The MEMS tensile tester has a ''Bosch'' etched hole to allow for direct viewing of the microstructure in a TEM before, during, and after loading. This approach allows for the quantitative measurements of stress-strain relations while imaging dislocation motion, and determination of fracture nucleation in samples with well-known fatigue/strain histories. This technique facilitates the determination of the limits for classical deformation mechanisms and helps to formulate a new understanding of the mechanical response as the grain sizes are refined to a nanometer scale. Together, these studies will result in a science

  4. A novel hybrid surface micromachined segmented mirror for large aperture laser applications

    Science.gov (United States)

    Li, Jie; Chen, Haiqing; Yu, Hongbin

    2006-07-01

    A novel hybrid surface micromachined segmented mirror array is described. This device is capable of scaling to large apertures for correcting time-varying aberrations in laser applications. Each mirror is composed of bottom electrode, support part, and mirror plate, in which a T-shaped beam structure is used to support the mirror plate. It can provide mirror with vertical movement and rotation around two horizontal axes. The test results show that the maximum deflection along the vertical direction of the mirror plate is 2 microns, while the rotation angles around x and y axes are +-2.3 deg. and +-1.45 deg., respectively.

  5. Micromachining technology for thermal ink-jet products

    Science.gov (United States)

    Verdonckt-Vandebroek, Sophie

    1997-09-01

    This paper reviews recent trends and evolutions in the low- end color printing market which is currently dominated by thermal inkjet (TIJ) based products. Micro electromechanical systems technology has been an enabler for the unprecedented cost/performance ratio of these printing products. The generic TIJ operating principles are based on an intimate blend of thermodynamics, fluid dynamics and LSI electronics. The key principles and design issues are outlined and the fabrication of TIJ printheads illustrated with an implementation by the Xerox Corporation.

  6. Modeling and identification of induction micromachines in microelectromechanical systems applications

    Energy Technology Data Exchange (ETDEWEB)

    Lyshevski, S.E. [Purdue University at Indianapolis (United States). Dept. of Electrical and Computer Engineering

    2002-11-01

    Microelectromechanical systems (MEMS), which integrate motion microstructures, radiating energy microdevices, controlling and signal processing integrated circuits (ICs), are widely used. Rotational and translational electromagnetic based micromachines are used in MEMS as actuators and sensors. Brushless high performance micromachines are the preferable choice in different MEMS applications, and therefore, synchronous and induction micromachines are the best candidates. Affordability, good performance characteristics (efficiency, controllability, robustness, reliability, power and torque densities etc.) and expanded operating envelopes result in a strong interest in the application of induction micromachines. In addition, induction micromachines can be easily fabricated using surface micromachining and high aspect ratio fabrication technologies. Thus, it is anticipated that induction micromachines, controlled using different control algorithms implemented using ICs, will be widely used in MEMS. Controllers can be implemented using specifically designed ICs to attain superior performance, maximize efficiency and controllability, minimize losses and electromagnetic interference, reduce noise and vibration, etc. In order to design controllers, the induction micromachine must be modeled, and its mathematical model parameters must be identified. Using microelectromechanics, nonlinear mathematical models are derived. This paper illustrates the application of nonlinear identification methods as applied to identify the unknown parameters of three phase induction micromachines. Two identification methods are studied. In particular, nonlinear error mapping technique and least squares identification are researched. Analytical and numerical results, as well as practical capabilities and effectiveness, are illustrated, identifying the unknown parameters of a three phase brushless induction micromotor. Experimental results fully support the identification methods. (author)

  7. A novel surface micromachining process to fabricate AlN unimorph suspensions and its application for RF resonators

    NARCIS (Netherlands)

    Saravanan, S.; Saravanan, S.; Berenschot, Johan W.; Krijnen, Gijsbertus J.M.; Elwenspoek, Michael Curt

    2006-01-01

    A novel surface micromachining process is reported for aluminum nitride (AlN) thin films to fabricate piezoelectric unimorph suspension devices for micro actuator applications. Wet anisotropic etching of AlN thin film is used with a Cr metal mask layer in the microfabrication process. Tetra methyl

  8. New Effective Material Couple--Oxide Ceramic and Carbon Nanotube-- Developed for Aerospace Microsystem and Micromachine Technologies

    Science.gov (United States)

    Miyoshi, Kazuhisa; VanderWal, Randall L.; Tomasek, Aaron J.; Sayir, Ali; Farmer, Serene C.

    2004-01-01

    The prime driving force for using microsystem and micromachine technologies in transport vehicles, such as spacecraft, aircraft, and automobiles, is to reduce the weight, power consumption, and volume of components and systems to lower costs and increase affordability and reliability. However, a number of specific issues need to be addressed with respect to using microsystems and micromachines in aerospace applications--such as the lack of understanding of material characteristics; methods for producing and testing the materials in small batches; the limited proven durability and lifetime of current microcomponents, packaging, and interconnections; a cultural change with respect to system designs; and the use of embedded software, which will require new product assurance guidelines. In regards to material characteristics, there are significant adhesion, friction, and wear issues in using microdevices. Because these issues are directly related to surface phenomena, they cannot be scaled down linearly and they become increasingly important as the devices become smaller. When microsystems have contacting surfaces in relative motion, the adhesion and friction affect performance, energy consumption, wear damage, maintenance, lifetime and catastrophic failure, and reliability. Ceramics, for the most part, do not have inherently good friction and wear properties. For example, coefficients of friction in excess of 0.7 have been reported for ceramics and ceramic composite materials. Under Alternate Fuels Foundation Technologies funding, two-phase oxide ceramics developed for superior high-temperature wear resistance in NASA's High Operating Temperature Propulsion Components (HOTPC) project and new two-layered carbon nanotube (CNT) coatings (CNT topcoat/iron bondcoat/quartz substrate) developed in NASA's Revolutionary Aeropropulsion Concepts (RAC) project have been chosen as a materials couple for aerospace applications, including micromachines, in the nanotechnology

  9. Comparison of residual stress measurement in thin films using surface micromachining method

    International Nuclear Information System (INIS)

    He, Q.; Luo, Z.X.; Chen, X.Y.

    2008-01-01

    Conductive, dielectric, semiconducting, piezoelectric and ferroelectric thin films are extensively used for MEMS/NEMS applications. One of the important parameters of thin films is residual stress. The residual stress can seriously affect the properties, performance and long-term stability of the films. Excessive compressive or tensile stress results in buckling, cracking, splintering and sticking problems. Stress measurement techniques are therefore essential for both process development and process monitoring. Many suggestions for stress measurement in thin films have been made over the past several decades. This paper is concentrated on the in situ stress measurement using surface micromachining techniques to determine the residual stress. The authors review and compare several types of stress measurement methods including buckling technique, rotating technique, micro strain gauge and long-short beam strain sensor

  10. Minimizing stress in large-area surface micromachined perforated membranes with slits

    International Nuclear Information System (INIS)

    Ghaderi, M; Ayerden, N P; De Graaf, G; Wolffenbuttel, R F

    2015-01-01

    This paper presents the effectiveness of both design and fabrication techniques for avoiding the rupturing or excessive bending of perforated membranes after release in surface micromachining. Special lateral designs of arrays of slits in the membrane were investigated for a maximum yield at a given level of residual stress. Process parameters were investigated and optimized for minimum residual stress in multilayer thin-film membranes. A 2 µm thick sacrificial TEOS layer and a structural membrane that is composed of silicon nitride and polysilicon layers in the stack is the basis of this study. The effect of sharp corners on the local stress in membranes was investigated, and structures are proposed that reduce these effects, maximizing the yield at a given level of residual stress. The effects of perforation and slits were studied both theoretically and using finite element analysis. While the overall effect of perforation is negligible in typical MEMS structures, an optimum design for the slits reduces the von Mises stress considerably as compared to sharp corners. The fabrication process was also investigated and optimized for the minimum residual stress of both the layers within the stack and the complete layer stack. The main emphasis of this work is on placing a stress-compensating layer on the wafer backside and simultaneously removing it during the surface micromachining, as this has been found to be the most effective method to reduce the overall stress in a stack of layers after sacrificial etching. Implementation of a stress compensating layer reduced the total residual stress from 200 MPa compressive into almost 60 MPa, tensile. Even though a particular structure was studied here, the employed methods are expected to be applicable to similar MEMS design problems. (paper)

  11. High efficiency on-chip Dielectric Resonator Antennna using micromachining technology

    KAUST Repository

    Sallam, Mai O.; Serry, Mohamed; Shamim, Atif; De Raedt, Walter; Sedky, Sherif; Vandenbosch, Guy A. E.; Soliman, Ezzeldin A.

    2015-01-01

    In this paper, a novel cylindrical Dielectric Resonator Antenna (DRA) operating at 60 GHz is introduced. The antenna is fabricated using a high-resistivity silicon wafer. The DR is defined in the wafer using micromachining technology. The feeding network is located at the other side of the wafer. The proposed antenna is simulated using HFSS and the results are verified by measurements. The antenna radiation is mainly along the broadside direction. The measured gain, radiation efficiency, and bandwidth are 7 dBi, 74.65%, and 2.23 GHz respectively. The antenna is characterized by high polarization purity where the maximum cross-polarization is -15 dB. © 2015 IEEE.

  12. High efficiency on-chip Dielectric Resonator Antennna using micromachining technology

    KAUST Repository

    Sallam, Mai O.

    2015-10-26

    In this paper, a novel cylindrical Dielectric Resonator Antenna (DRA) operating at 60 GHz is introduced. The antenna is fabricated using a high-resistivity silicon wafer. The DR is defined in the wafer using micromachining technology. The feeding network is located at the other side of the wafer. The proposed antenna is simulated using HFSS and the results are verified by measurements. The antenna radiation is mainly along the broadside direction. The measured gain, radiation efficiency, and bandwidth are 7 dBi, 74.65%, and 2.23 GHz respectively. The antenna is characterized by high polarization purity where the maximum cross-polarization is -15 dB. © 2015 IEEE.

  13. Monolithic integration of micromachined sensors and CMOS circuits based on SOI technologies

    International Nuclear Information System (INIS)

    Yu Xiaomei; Tang Yaquan; Zhang Haitao

    2008-01-01

    This note presents a novel way to monolithically integrate micro-cantilever sensors and signal conditioning circuits by combining SOI CMOS and SOI micromachining technologies. In order to improve the sensor performance and reduce the system volume, an integrated sensor system composed of a piezoresistive cantilever array, a temperature-compensation current reference, a digitally controlled multiplexer and an instrument amplifier is designed and finally fabricated. A post-SOI CMOS process is developed to realize the integrated sensor system which is based on a standard CMOS process with one more mask to define the cantilever structure at the end of the process. Measurements on the finished SOI CMOS devices and circuits show that the integration process has good compatibility both for the cantilever sensors and for the CMOS circuits, and the SOI CMOS integration process can decrease about 25% sequences compared with the bulk silicon CMOS process. (note)

  14. FY 1994 Report on the technical results. Research and development of micromachine technologies (Development of highly functional maintenance technologies for power plants); 1994 nendo micromachine gijutsu no kenkyu kaihatsu seika hokokusho. Hatsuden shisetsuyo kokino maintenance gijutsu kaihatsu

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1995-09-01

    This research and development project is aimed at development of the technologies for the micromachines provided with maintenance functions, e.g., for examination and maintenance of abnormal conditions in heat exchangers, piping systems or the like. The initial target is set at establishment of basic technologies for the micromachines, in consideration of the available technologies. The R and D activities are directed to (1) microcapsules for, e.g., micro power generators, (2) mother machines having controlling and instructing functions, (3) non-cabled examination modules, (4) cabled examination modules, and (5) total systems. The item (1) involves the micro power generators, and mechanisms of signal transmission, flaw finding and driving/suspension; the item (2) mechanisms of micro-optics and connection, group controlling, microbatteries, action type controlling, and artificial muscles; the item (3) expansion/contraction type transfer mechanisms, light energy supply, micro visual sensation, function connection, and concerted controlling; the item (4) tubular manipulators, and mechanisms of light-aided power generation and voltage elevation; and the item (5) maintenance and micromachine systems. (NEDO)

  15. Surface-micromachined magnetic undulator with period length between 10μm and 1 mm for advanced light sources

    Science.gov (United States)

    Harrison, Jere; Joshi, Abhijeet; Lake, Jonathan; Candler, Rob; Musumeci, Pietro

    2012-07-01

    A technological gap exists between the μm-scale wiggling periods achieved using electromagnetic waves of high intensity laser pulses and the mm scale of permanent-magnet and superconducting undulators. In the sub-mm range, surface-micromachined soft-magnetic micro-electro-mechanical system inductors with integrated solenoidal coils have already experimentally demonstrated 100 to 500 mT field amplitude across air gaps as large as 15μm. Simulations indicate that magnetic fields as large as 1.5 T across 50μm inductor gaps are feasible. A simple rearranging of the yoke and pole geometry allows for fabrication of 10+ cm long undulator structures with period lengths between 12.5μm and 1 mm. Such undulators find application both in high average power spontaneous emission sources and, if used in combination with ultrahigh-brightness electron beams, could lead to the realization of low energy compact free-electron lasers. Challenges include electron energy broadening due to wakefields and Joule heating in the electromagnet.

  16. Polyimide as a versatile enabling material for microsystems fabrication: surface micromachining and electrodeposited nanowires integration

    Science.gov (United States)

    Walewyns, Thomas; Reckinger, Nicolas; Ryelandt, Sophie; Pardoen, Thomas; Raskin, Jean-Pierre; Francis, Laurent A.

    2013-09-01

    The interest of using polyimide as a sacrificial and anchoring layer is demonstrated for post-processing surface micromachining and for the incorporation of metallic nanowires into microsystems. In addition to properties like a high planarization factor, a good resistance to most non-oxidizing acids and bases, and CMOS compatibility, polyimide can also be used as a mold for nanostructures after ion track-etching. Moreover, specific polyimide grades, such as PI-2611 from HD Microsystems™, involve a thermal expansion coefficient similar to silicon and low internal stress. The process developed in this study permits higher gaps compared to the state-of-the-art, limits stiction problems with the substrate and is adapted to various top-layer materials. Most metals, semiconductors or ceramics will not be affected by the oxygen plasma required for polyimide etching. Released structures with vertical gaps from one to several tens of μm have been obtained, possibly using multiple layers of polyimide. Furthermore, patterned freestanding nanowires have been synthesized with diameters from 20 to 60 nm and up to 3 μm in length. These results have been applied to the fabrication of two specific devices: a generic nanomechanical testing lab-on-chip platform and a miniaturized ionization sensor.

  17. Micromachined silicon seismic accelerometer development

    Energy Technology Data Exchange (ETDEWEB)

    Barron, C.C.; Fleming, J.G.; Montague, S. [and others

    1996-08-01

    Batch-fabricated silicon seismic transducers could revolutionize the discipline of seismic monitoring by providing inexpensive, easily deployable sensor arrays. Our ultimate goal is to fabricate seismic sensors with sensitivity and noise performance comparable to short-period seismometers in common use. We expect several phases of development will be required to accomplish that level of performance. Traditional silicon micromachining techniques are not ideally suited to the simultaneous fabrication of a large proof mass and soft suspension, such as one needs to achieve the extreme sensitivities required for seismic measurements. We have therefore developed a novel {open_quotes}mold{close_quotes} micromachining technology that promises to make larger proof masses (in the 1-10 mg range) possible. We have successfully integrated this micromolding capability with our surface-micromachining process, which enables the formation of soft suspension springs. Our calculations indicate that devices made in this new integrated technology will resolve down to at least sub-{mu}G signals, and may even approach the 10{sup -10} G/{radical}Hz acceleration levels found in the low-earth-noise model.

  18. Achievement report on commissioned research of R and D in fiscal 1999 on micro-machine technologies. R and D of micro-machine technologies; 1999 nendo kenkyu seika hokokusho. Maikuro mashin gijutsu no kenkyu kaihatsu

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    2001-03-01

    With an objective to perform diagnoses and medical treatment in space limited portions in living organisms, research on micro-machine systems, research on a scanning type photographing unit in the medical micro-machine, and comprehensive surveys and researches have been conducted. This paper summarizes the achievements in fiscal 1999. In the research of a micro laser catheter, a prototype laser head having an outer diameter of 1 mm was fabricated, whereas composition was realized with a micro catheter having an outer diameter of 1.5 mm. With regard to the micro pressure sensor for catheterization, good active curving action was realized by a catheter in which a pressure sensor is mounted in the SMA curved catheter head. Research on the scanning type photographing unit has been carried out, for reducing further the diameter and size of an endoscope, on a photographing unit using laser beam whose cross section area of the tip optical section is about half of the conventional units. As a result, a high resolution scanning type photographing unit was realized based on the fiber optic system using a scanning mirror. In the comprehensive surveys and researches, items of information were collected in relation with the basic technologies for micro-machines. (NEDO)

  19. Trend of advanced technology of micromachines in the USA; Beikoku ni okeru micro machine sentan gijutsu doko chosa hokokusho

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1996-03-01

    In this research, the data of advanced technology of micromachines in the USA have been searched, collected, and arranged from the US patent information, technical journal information, and newspaper and general journal information. According to demand, the main undertaking information was interviewed from well-informed persons. The data were compiled as advanced technology trend of micromachines in the USA. Sensors are remarkably predominant in the elemental technology. There are also important topics in the fields of actuators, motors, lenses, devices, and structures. On the other hand, materials, etchings, packages, motive powers, and softwares are also important elemental technology in spite of their less information. From the viewpoint of usage, detection systems are remarkably predominant. Then, robots, processing systems, optics, analysis systems, motive power systems, medical systems, and acoustic systems are also important. From the viewpoint of industrial sector, the environmental items are predominant. Automobiles, medical treatments, and information communications follow the above. When new relationships to the secondary usage and tertiary usage are not found, it would be rather hard to express such a technology development trend more clearly.

  20. Fiscal 1997 report on technological results. R and D on micromachine technology (Development of micro-factory technology); 1997 nendo micromachine gijutsu no kenkyu kaihatsu seika hokokusho. Microfactory gijutsu kaihatsu

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1998-03-01

    Activities are conducted in search of a micromachine system in which devices and equipment relating to machining, assembly, transportation, inspection, etc., in use for a manufacturing process are integrated in a narrow space, for the purpose of conserving energy through the miniaturization of the process of manufacturing small industrial products. With the activities in the two fields of (1) R and D of systematization technology (experimental system for micro fabrication/assembly) and (2) comprehensive investigation and research, examination on detailed specification for the experimental system was carried out, as were the examination of element technologies, element device operating experiments, technological investigation, etc.. In (1), sophistication of the element technologies was contrived that were required for realizing each experimental system, while the detailed specification of each experimental system was decided. Further, a part of the element devices was experimentally manufactured, with the basic functions verified. In (2), research studies were compiled on radio interference for example in the case where various devices were integrated and highly densified through the formation of a micro-factory; also compiled was a joint research with Agency of Industrial Science and Technology, a research conducted for the purpose of building the conception of the micro-factory. (NEDO)

  1. Fiscal 1997 technological survey report. R and D on micromachine technology (Development of high functional maintenance technology for power station equipment); 1997 nendo micromachine gijutsu no kenkyu kaihatsu seika hokokusho. Hatsuden shisetsuyo kokino maintenance gijutsu kaihatsu

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1998-03-01

    Activities were conducted in search of micromachine technology for a high functional maintenance system that inspects and repairs abnormal conditions such as cracks in a heat exchanger or a piping system without disassembling it in a power generating station such as a thermal or nuclear power plant. The activities were proceeded in four areas of (1) experimental manufacturing of the system (an inline self-running environment recognizing system, an external inspection system for fine tube group, and a system capable of light internal operation such as welding), (2) R and D on sophistication technology for functional devices, (3) R and D on common basic technologies, and (4) comprehensive investigation and research. In (1), examination of detailed basic specifications was carried out, as were examination of element technologies, experimental manufacturing and operation test of element devices, and performance evaluation. Further, a part of element devices was made on an experimental basis, with the basic functions demonstrated. In the comprehensive investigation and research, a trend in the future maintenance technology in power generating equipment was obtained and pigeonholed. (NEDO)

  2. Achievement report for fiscal 1996 on the research and development of micromachine technology. Development of advanced-function maintenance technology for power generation facilities; 1996 nendo micromachine gijutsu no kenkyu kaihatsu seika hokokusho. Hatsuden shisetsuyo kokino maintenance gijutsu kaihatsu

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1997-03-01

    Technologies for integrating functions are studied for a self-propelled surroundings recognition system that travels in a small-diameter tube at power generation facilities. Parameters are analyzed, and piezoelectric locomotion devices are reduced in size. A disk shape microantenna is experimentally built and evaluated, which is for realizing energy supply and communication by means of microwaves. Studies are conducted to improve the performance of optical energy transmission devices and to realize their systematization. Basic specifications are established for the embodiment of CCD (charge coupled device) microcameras to be installed. A high-efficiency, high-reliability micromachine system is constructed, in which multiple machines coordinate with each other for the exterior inspection of groups of small-diameter tubes. Devices which are capable of driving, deceleration, and propulsion prove to be feasible. Basic specifications are established for microconnectors to connect, separate, and combine multiple machines as occasion calls. Also discussed is the development of a micromachine for tube interior check and repair which operates making use of the inspection hole enabling tube interior check and repair without the need of disassembling the equipment to be repaired.

  3. Fiscal 1993 report on technological results. R and D on micromachine technology; 1993 nendo micro machine gijutsu no kenkyu kaihatsu seika hokokusho

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1994-12-01

    Researches on basic element technology of micromachines are conducted with the view of establishing a mechanical system constituted of minute functional elements that perform autonomous operations in a narrow small part of complicated equipment in a power station for example or in a living body. The areas of activity are 1. research on micro actuators and 2. research on basic technology of micromachine; 1 is classified into researches of (1) shape-memory actuator, (2) bending and stretching type actuator, and (3) integrated micro actuator, while 2 is classified into researches of (1) total system for medical diagnosis, (2) micro tactile sensing technology and laser applied diagnosis/treatment technology, and (3) blood pressure/blood circulation sensing technology. In 1-(1), a chemo-mechanical actuator was studied using a shape memory alloy (SMA) and a high polymer gel, and in 1-(2), an SMA and bimetal were employed as a source of the driving force. Further, examination was also made on a fluid driving type actuator. (NEDO)

  4. FY1995 development of micromachine technology based on insects; 1995 nendo konchu wo kihan to suru micromachine gijutsu no kakuritsu to jitsuyoka

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1997-03-01

    If we develop micromachines by reducing simply the size of conventional mechanical systems, we cannot get sufficient performances of them because of scale-effect. Small natural creatures, insects, have very good structures and functions reasonable for their small size. In this research, basic characteristics of sensors, actuators, information processing functions, etc. of insects are studied and artificial systems similar to them are developed for industrial application. (1) Compound eyes: Insect compound eyes is the visual sensor which is composed of microlenses which are distributed three-dimensionally, receptors which vibrate with small amplitude around an optical axis and neural networks. In this research, the large scale model (several centimeters sized) of insect compound eyes has been developed. (2) Pheromone sensor: Pheromone gas sensor has been made of real male silkworm moth antenae. This sensor has been proved to work well as the female pheromone detector. This sensor was installed at the nose part of a wheeled mobile robot and this robot was observed to act like a real silkworm moth subjected to female pheromone stream. (3) Electrostatic microactuator: Generally speaking, high voltage(higher than 100V) electric power is necessary to actuate the electrostatic actuator. It was considered to be impossible to actuate them directly from CMOS. In this research, a new electrostatic actuator which can be actuated with less than 10V voltage can cause a fairly large displacement. (4) Hydraulic actuator: For micromachines, hydraulic pressure will be applicable for actuation. Structures may be simple and scale effect may give an advantageous characteristics for microsize. A butterfly-type flying robot was developed and it flied up along a vertical bar. (NEDO)

  5. Excimer laser micromachining for 3D microstructure

    NARCIS (Netherlands)

    Choi, Kyung Hyun; Meijer, J.; Masuzawa, Takahisa; Kim, Dae-Hyun

    2004-01-01

    A new 3D micromachining method, called Hole Area Modulation (HAM), has been introduced to enhance the current micromachining technology. In this method, information on the machining depth is converted to the sizes of holes on the mask. The machining is carried out with a simple 2D movement of the

  6. Surface-micromachined magnetic undulator with period length between 10  μm and 1 mm for advanced light sources

    Directory of Open Access Journals (Sweden)

    Jere Harrison

    2012-07-01

    Full Text Available A technological gap exists between the μm-scale wiggling periods achieved using electromagnetic waves of high intensity laser pulses and the mm scale of permanent-magnet and superconducting undulators. In the sub-mm range, surface-micromachined soft-magnetic micro-electro-mechanical system inductors with integrated solenoidal coils have already experimentally demonstrated 100 to 500 mT field amplitude across air gaps as large as 15  μm. Simulations indicate that magnetic fields as large as 1.5 T across 50  μm inductor gaps are feasible. A simple rearranging of the yoke and pole geometry allows for fabrication of 10+ cm long undulator structures with period lengths between 12.5  μm and 1 mm. Such undulators find application both in high average power spontaneous emission sources and, if used in combination with ultrahigh-brightness electron beams, could lead to the realization of low energy compact free-electron lasers. Challenges include electron energy broadening due to wakefields and Joule heating in the electromagnet.

  7. Micromachined tunable metamaterials: a review

    International Nuclear Information System (INIS)

    Liu, A Q; Zhu, W M; Tsai, D P; Zheludev, N I

    2012-01-01

    This paper reviews micromachined tunable metamaterials, whereby the tuning capabilities are based on the mechanical reconfiguration of the lattice and/or the metamaterial element geometry. The primary focus of this review is the feasibility of the realization of micromachined tunable metamaterials via structure reconfiguration and the current state of the art in the fabrication technologies of structurally reconfigurable metamaterial elements. The micromachined reconfigurable microstructures not only offer a new tuning method for metamaterials without being limited by the nonlinearity of constituent materials, but also enable a new paradigm of reconfigurable metamaterial-based devices with mechanical actuations. With recent development in nanomachining technology, it is possible to develop structurally reconfigurable metamaterials with faster tuning speed, higher density of integration and more flexible choice of the working frequencies. (review article)

  8. Advanced Surface Technology

    DEFF Research Database (Denmark)

    Møller, Per; Nielsen, Lars Pleht

    of the components. It covers everything from biocompatible surfaces of IR absorbent or reflective surfaces to surfaces with specific properties within low friction, hardness, corrosion, colors, etc. The book includes more than 400 pages detailing virtually all analysis methods for examining at surfaces.......This new significant book on advanced modern surface technology in all its variations, is aimed at both teaching at engineering schools and practical application in industry. The work covers all the significant aspects of modern surface technology and also describes how new advanced techniques make...

  9. Advanced measurement and analysis of surface textures produced by micro-machining processes

    International Nuclear Information System (INIS)

    Bordatchev, Evgueni V; Hafiz, Abdullah M K

    2014-01-01

    Surface texture of a part or a product has significant effects on its functionality, physical-mechanical properties and visual appearance. In particular for miniature products, the implication of surface quality becomes critical owing to the presence of geometrical features with micro/nano-scale dimensions. Qualitative and quantitative assessments of surface texture are carried out predominantly by profile parameters, which are often insufficient to address the contribution of constituent spatial components with varied amplitudes and wavelengths. In this context, this article presents a novel approach for advanced measurement and analysis of profile average roughness (R a ) and its spatial distribution at different wavelength intervals. The applicability of the proposed approach was verified for three different surface topographies prepared by grinding, laser micro-polishing and micro-milling processes. From the measurement and analysis results, R a (λ) spatial distribution was found to be an effective measure of revealing the contributions of various spatial components within specific wavelength intervals towards formation of the entire surface profile. In addition, the approach was extended to the measurement and analysis of areal average roughness S a (λ) spatial distribution within different wavelength intervals. Besides, the proposed method was demonstrated to be a useful technique in developing a functional correlation between a manufacturing process and its corresponding surface profile. (paper)

  10. The Laser MicroJet (LMJ): a multi-solution technology for high quality micro-machining

    Science.gov (United States)

    Mai, Tuan Anh; Richerzhagen, Bernold; Snowdon, Paul C.; Wood, David; Maropoulos, Paul G.

    2007-02-01

    The field of laser micromachining is highly diverse. There are many different types of lasers available in the market. Due to their differences in irradiating wavelength, output power and pulse characteristic they can be selected for different applications depending on material and feature size [1]. The main issues by using these lasers are heat damages, contamination and low ablation rates. This report examines on the application of the Laser MicroJet(R) (LMJ), a unique combination of a laser beam with a hair-thin water jet as a universal tool for micro-machining of MEMS substrates, as well as ferrous and non-ferrous materials. The materials include gallium arsenide (GaAs) & silicon wafers, steel, tantalum and alumina ceramic. A Nd:YAG laser operating at 1064 nm (infra red) and frequency doubled 532 nm (green) were employed for the micro-machining of these materials.

  11. Achievement report on commissioned research of R and D in fiscal 2000 on micromachine technologies. Development of microfactory technology; 2000 nendo kenkyu seika hokokusho. Maikuro fakutori gijutsu kaihatsu

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    2001-04-01

    In order to achieve energy saving by miniaturizing the manufacturing process of small industrial products, R and D has been carried out on a micromachine system that puts together and assemble such devices as for processing, assembling, transportation and inspection used in the manufacturing process. This paper summarizes the achievements in fiscal 2000. In the research of a prototype micro-processing and assembling system, the secondary prototype system was fabricated, and verification was performed on its operation in processing and assembling works of a very small gear train. In the research of a micro liquid manipulating technology, high function liquid delivering device and holding device were developed, whereas the achievement of the targeted specifications was identified. In the research of a micro assembling technology, processing accuracy was improved on micro encoder disks. Furthermore, two second prototype micro arms were assembled into a microfactory to have performed verification on continuous operation to assemble trains of gears with a diameter of 10 mm. Other researches included the micro beam driving technology, micro electric power driving technology, micro transporting technology, and micro inspection technology. (NEDO)

  12. Micromachined Piezoelectric Actuators for Cryogenic Adaptive Optics, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — TRS Technologies proposes micromachined single crystal piezoelectric actuator arrays to enable ultra-large stroke, high precision shape control for large aperture,...

  13. Enhancing structural integrity of adhesive bonds through pulsed laser surface micro-machining

    KAUST Repository

    Diaz, Edwin Hernandez

    2015-01-01

    of different kinds of heterogeneous surface properties that may replicate this behavior and the mechanisms at work. In order to do this, we used pulsed laser ablation on copper substrates (CuZn40) aiming to increase adhesion for bonding. A Yb-fiber laser

  14. Development of multi-axis laser micromachining system suitable for machining non-linear contoured surfaces

    OpenAIRE

    Kerimoğlu, Serhat

    2016-01-01

    Cataloged from PDF version of article. Thesis (M.S.): Bilkent University, Department of Mechanical Engineering, İhsan Doğramacı Bilkent University, 2016. Includes bibliographical references (leaves 82-84). In recent years, studies on manufacturing systems have proved the importance of cooperation of positioning systems with laser cutting technology. The performance of the manufacturing system can be improved by utilizing both laser and positioning systems together. In thi...

  15. Micromachining process – current situation and challenges

    Directory of Open Access Journals (Sweden)

    Lalakiya Meet Rajeshkumar

    2015-01-01

    Full Text Available The rapid progress in the scientific innovations and the hunt for the renewable energy increases the urge for producing the bio electronic products, solar cells, bio batteries, nano robots, MEMS, blood less surgical tools which can be possible with the aid of the micromachining. This article helps us to understand the evolution and the challenges faced by the micromachining process. Micro machining is an enabling technology that facilitates component miniaturization and improved performance characteristics. Growing demand for less weight, high accuracy, high precision, meagre lead time, reduced batch size, less human interference are the key drivers for the micromachining than the conventional machining process.

  16. A 35 GHz wireless millimeter-wave power sensor based on GaAs micromachining technology

    International Nuclear Information System (INIS)

    Wang, De-bo; Liao, Xiao-ping

    2012-01-01

    A novel MEMS wireless millimeter-wave power sensor based on GaAs MMIC technology is presented in this paper. The principle of this wireless millimeter-wave power sensor is explained. It is designed and fabricated using MEMS technology and the GaAs MMIC process. With the millimeter-wave power range from 0.1 to 80 mW, the sensitivity of the wireless millimeter-wave power sensor is about 0.246 mV mW −1 at 35 GHz. In order to verify the power detection capability, this wireless power sensor is mounted on a PCB which influences the microwave performance of the CPW-fed antenna including the return loss and the radiation pattern. The frequency-dependent characteristic and the degree-dependent characteristic of this wireless power sensor are researched. Furthermore, in addition to the combination of the advantages of CPW-fed antenna with the advantages of the thermoelectric power sensor, another significant advantage of this wireless millimeter-wave power sensor is that it can be integrated with MMICs and other planar connecting circuit structures with zero dc power consumption. These features make it suitable for various applications ranging from the environment or space radiation detection systems to radar receiver and transmitter systems. (paper)

  17. Micromachined Precision Inertial Instruments

    National Research Council Canada - National Science Library

    Najafi, Khalil

    2003-01-01

    This program focuses on developing inertial-grade micromachined accelerometers and gyroscopes and their associated electronics and packaging for use in a variety of military and commercial applications...

  18. Achievement report on commissioned research of R and D in fiscal 2000 on micromachine technologies. Development of high function maintenance technology for power generation facilities; 2000 nendo kenkyu seika hokokusho. Hatsuden shisetsu you kokino mentenansu gijutsu kaihatsu

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    2001-03-01

    R and D has been carried out on a high function maintenance system that performs inspection and repair of anomalies such as internal cracks by using micromachines without need of disassembling heat exchangers and piping systems in power generation facilities. This paper summarizes the achievements in fiscal 2000. In the research of a prototype self-propelled system to recognize environment in tubes, the secondary prototype system integrating all of the elemental devices was fabricated, and its functions were verified. In the research of a prototype system to inspect outer surface of fine tube groups, a plurality of single machines that perform movement in narrow spaces on flat surface, interlocking, separation and flaw detection were connected to execute a vertical movement experiment. In the research of a prototype system for works internal to devices, fabrication and functional verification were conducted on the final prototype system which is equipped with functions of measuring very small nicks and performing repair works, which are mounted on the tip of a curved tube unit with multiple degrees of freedom. In the research of a functional device improving technology, a device that puts together artificial muscles, micro-joints, and a suspension device with very low friction was fabricated, and a functional verification was implemented thereon. (NEDO)

  19. Micromachined Ultrasonic Transducers for 3-D Imaging

    DEFF Research Database (Denmark)

    Christiansen, Thomas Lehrmann

    of state-of-the-art 3-D ultrasound systems. The focus is on row-column addressed transducer arrays. This previously sparsely investigated addressing scheme offers a highly reduced number of transducer elements, resulting in reduced transducer manufacturing costs and data processing. To produce...... such transducer arrays, capacitive micromachined ultrasonic transducer (CMUT) technology is chosen for this project. Properties such as high bandwidth and high design flexibility makes this an attractive transducer technology, which is under continuous development in the research community. A theoretical...... treatment of CMUTs is presented, including investigations of the anisotropic plate behaviour and modal radiation patterns of such devices. Several new CMUT fabrication approaches are developed and investigated in terms of oxide quality and surface protrusions, culminating in a simple four-mask process...

  20. A surface-micromachining-based inertial micro-switch with compliant cantilever beam as movable electrode for enduring high shock and prolonging contact time

    Energy Technology Data Exchange (ETDEWEB)

    Xu, Qiu [National Key Laboratory of Science and Technology on Micro/Nano Fabrication, School of Electronics Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai, 200240 (China); Yang, Zhuoqing, E-mail: yzhuoqing@sjtu.edu.cn [National Key Laboratory of Science and Technology on Micro/Nano Fabrication, School of Electronics Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai, 200240 (China); Fu, Bo; Li, Jianhua; Wu, Hao [Huaihai Industrial Group Co., Ltd., Changzhi, Shanxi Province, 046012 (China); Zhang, Qihuan; Sun, Yunna; Ding, Guifu; Zhao, Xiaolin [National Key Laboratory of Science and Technology on Micro/Nano Fabrication, School of Electronics Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai, 200240 (China)

    2016-11-30

    Highlights: • The designed cantilever beam attached to the proof mass can endure a larger shock acceleration (∼1000 g order of magnitude) compared to those traditional designs (∼100 g order of magnitude). • Effect of the pulse width on the threshold acceleration, the response time and the contact time is investigated. • A constraint sleeve structure is introduced to lower the off-axis sensitivity. - Abstract: A novel laterally-driven inertial micro-switch with two L-shaped elastic cantilever beams as the movable electrode, which is attached to the proof mass, is proposed in this paper. The advantage of this design is that the contact time of the inertial micro-switch can be prolonged. Meanwhile, the micro-switch can withstand a higher shock than the traditional designs whose cantilever beams are attached to the fixed electrode. The designed inertial micro-switch was simulated and optimized with ANSYS software and fabricated on a quartz substrate by surface micromachining technology. The simulated result demonstrates that the threshold acceleration (a{sub ths}) under stable switch-on state is about 288 g and the contact time is about 198 μs when the pulse width of acceleration loads is 1 ms. At the same time, it indicates that the threshold acceleration, the response time and the contact time of designed micro-switch all increase with the pulse width of acceleration loads. The simulation of impact process in non-sensitive direction shows that the introduced constraint sleeve structure in the novel inertial micro-switch can lower the off-axis sensitivity. The fabricated micro-switch prototype has been tested by a standard dropping hammer system under shock accelerations with various amplitudes and pulse widths. The experimental measurements show that the contact time is about 150 μs when the threshold acceleration is about 288 g. It also indicates that the response time and the contact time both increase with the pulse width, which is consistent with the

  1. Vascular tissue engineering by computer-aided laser micromachining.

    Science.gov (United States)

    Doraiswamy, Anand; Narayan, Roger J

    2010-04-28

    Many conventional technologies for fabricating tissue engineering scaffolds are not suitable for fabricating scaffolds with patient-specific attributes. For example, many conventional technologies for fabricating tissue engineering scaffolds do not provide control over overall scaffold geometry or over cell position within the scaffold. In this study, the use of computer-aided laser micromachining to create scaffolds for vascular tissue networks was investigated. Computer-aided laser micromachining was used to construct patterned surfaces in agarose or in silicon, which were used for differential adherence and growth of cells into vascular tissue networks. Concentric three-ring structures were fabricated on agarose hydrogel substrates, in which the inner ring contained human aortic endothelial cells, the middle ring contained HA587 human elastin and the outer ring contained human aortic vascular smooth muscle cells. Basement membrane matrix containing vascular endothelial growth factor and heparin was to promote proliferation of human aortic endothelial cells within the vascular tissue networks. Computer-aided laser micromachining provides a unique approach to fabricate small-diameter blood vessels for bypass surgery as well as other artificial tissues with complex geometries.

  2. Omega-X micromachining system

    International Nuclear Information System (INIS)

    Miller, D.M.

    1978-01-01

    A micromachining tool system with X- and omega-axes is used to machine spherical, aspherical, and irregular surfaces with a maximum contour error of 100 nonometers (nm) and surface waviness of no more than 0.8 nm RMS. The omega axis, named for the angular measurement of the rotation of an eccentric mechanism supporting one end of a tool bar, enables the pulse increments of the tool toward the workpiece to be as little as 0 to 4.4 nm. A dedicated computer coordinates motion in the two axes to produce the workpiece contour. Inertia is reduced by reducing the mass pulsed toward the workpiece to about one-fifth of its former value. The tool system includes calibration instruments to calibrate the micromachining tool system. Backlash is reduced and flexing decreased by using a rotary table and servomotor to pulse the tool in the omega-axis instead of a ball screw mechanism. A thermally-stabilized spindle roates the workpiece and is driven by a motor not mounted on the micromachining tool base through a torque-smoothing pulley and vibrationless rotary coupling. Abbe offset errors are almost eliminated by tool setting and calibration at spindle center height. Tool contour and workpiece contour are gaged on the machine; this enables the source of machining errors to be determined more readily, because the workpiece is gaged before its shape can be changed by removal from the machine

  3. Dual-beam focused ion beam/electron microscopy processing and metrology of redeposition during ion-surface 3D interactions, from micromachining to self-organized picostructures.

    Science.gov (United States)

    Moberlychan, Warren J

    2009-06-03

    Focused ion beam (FIB) tools have become a mainstay for processing and metrology of small structures. In order to expand the understanding of an ion impinging a surface (Sigmund sputtering theory) to our processing of small structures, the significance of 3D boundary conditions must be realized. We consider ion erosion for patterning/lithography, and optimize yields using the angle of incidence and chemical enhancement, but we find that the critical 3D parameters are aspect ratio and redeposition. We consider focused ion beam sputtering for micromachining small holes through membranes, but we find that the critical 3D considerations are implantation and redeposition. We consider ion beam self-assembly of nanostructures, but we find that control of the redeposition by ion and/or electron beams enables the growth of nanostructures and picostructures.

  4. Survey of practical application fields of micro-machine and micro-factory technologies in Japan; Nippon ni okeru maikuro machine oyobi maikuro factory gijutsu no jitsuyoka bun`ya chosa

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1996-02-01

    As for micro-machine and micro-factory technologies, research and development trends promoted by private companies were surveyed except for national projects. In the field of main technology development by private companies which do not participate in national projects, developments of micro-devices, such as micro-sensor, and micro-actuator, as well as basic technologies, such as machining, assembly, and material technology, are predominant. The applied fields of these aim at electronic industries for measurement and analysis equipment, motorcar sensors, information, communication, and home electric products. While, there are a few research and developments as to micro-robots. Research and developments aiming at application to medical field are widely promoted by private companies. In this field, micro-machining technology for micro-surgery and endoscopes is prospective. There is a photo-forceps technology for handling the micro-parts. However, there are few researches considering the micro-factory. 146 refs., 73 figs., 7 tabs.

  5. A level set methodology for predicting the effect of mask wear on surface evolution of features in abrasive jet micro-machining

    International Nuclear Information System (INIS)

    Burzynski, T; Papini, M

    2012-01-01

    A previous implementation of narrow-band level set methodology developed by the authors was extended to allow for the modelling of mask erosive wear in abrasive jet micro-machining (AJM). The model permits the prediction of the surface evolution of both the mask and the target simultaneously, by representing them as a hybrid and continuous mask–target surface. The model also accounts for the change in abrasive mass flux incident to both the target surface and, for the first time, the eroding mask edge, that is brought about by the presence of the mask edge itself. The predictions of the channel surface and eroded mask profiles were compared with measurements on channels machined in both glass and poly-methyl-methacrylate (PMMA) targets at both normal and oblique incidence, using tempered steel and elastomeric masks. A much better agreement between the predicted and measured profiles was found when mask wear was taken into account. Mask wear generally resulted in wider and deeper glass target profiles and wider PMMA target profiles, respectively, when compared to cases where no mask wear was present. This work has important implications for the AJM of complex MEMS and microfluidic devices that require longer machining times. (paper)

  6. Laser Micromachining and Information Discovery Using a Dual Beam Interferometry

    Energy Technology Data Exchange (ETDEWEB)

    Theppakuttaikomaraswamy, Senthil P. [Iowa State Univ., Ames, IA (United States)

    2001-01-01

    Lasers have proven to be among the most promising tools for micromachining because they can process features down to the size of the laser wavelength (smaller than 1 micrometer) and they provide a non-contact technology for machining. The demand for incorporating in-situ diagnostics technology into the micromachining environment is driven by the increasing need for producing micro-parts of high quality and accuracy. Laser interferometry can be used as an on-line monitoring tool and it is the aim of this work to enhance the understanding and application of Michelson interferometry principle for the in-situ diagnostics of the machining depth on the sub-micron and micron scales. micromachining is done on two different materials and a comprehensive investigation is done to control the width and depth of the machined feature. To control the width of the feature, laser micromachining is done on copper and a detailed analysis is performed. The objective of this experiment is to make a precision mask for sputtering with an array of holes on it using an Nd:YAG laser of 532 nm wavelength. The diameter of the hole is 50 μm and the spacing between holes (the distance between the centers) is 100 μm. Michelson interferometer is integrated with a laser machining system to control the depth of machining. An excimer laser of 308 nm wavelength is used for micromachining. A He-Ne laser of 632.8 nm wavelength is used as the light source for the interferometer. Interference patterns are created due to the change in the path length between the two interferometer arms. The machined depth information is obtained from the interference patterns on an oscilloscope detected by a photodiode. To compare the predicted depth by the interferometer with the true machining depth, a surface profilometer is used to measure the actual machining depth on the silicon. It is observed that the depths of machining obtained by the surface profile measurement are in accordance with the interferometer

  7. Achievement report for fiscal 1996 on the research and development of micromachine technology. Development of microfactory technology; 1996 nendo micromachine gijutsu no kenkyu kaihatsu seika hokokusho. Microfactory gijutsu kaihatsu

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1997-03-01

    The goal is to save energy and minimize the working space by constructing a manufacturing system comprising various micromachines with their dimensions fit for parts and products they handle. Development continues relative to microprocessing (electrolysis, and optical processing) and microscopic liquid operation (micropump, and part holding device). Under research in relation to the assembly process are a micro-arm to handle tiny parts and precision techniques for interfitting within a very small microfactory, a piezoelectric actuator for microscopic position adjusting, and ultraprecise microprocessing techniques indispensable for their manufacture. Also under research are the incorporation of optically driven microdevices developed before the preceding fiscal year into a microfactory and the study of microservo actuators capable of sophisticated positioning and velocity control. Concerning the microscopic transport system to deal with microscopic parts and products, studies are under way so as to embody systems driven by actuators of the electromagnetic type and electrostatic type. In this paper, reference is made to inspection techniques and comprehensive investigations. (NEDO)

  8. Silicon micromachined vibrating gyroscopes

    Science.gov (United States)

    Voss, Ralf

    1997-09-01

    This work gives an overview of silicon micromachined vibrating gyroscopes. Market perspectives and fields of application are pointed out. The advantage of using silicon micromachining is discussed and estimations of the desired performance, especially for automobiles are given. The general principle of vibrating gyroscopes is explained. Vibrating silicon gyroscopes can be divided into seven classes. for each class the characteristic principle is presented and examples are given. Finally a specific sensor, based on a tuning fork for automotive applications with a sensitivity of 250(mu) V/degrees is described in detail.

  9. Method of drying passivated micromachines by dewetting from a liquid-based process

    Science.gov (United States)

    Houston, Michael R.; Howe, Roger T.; Maboudian, Roya; Srinivasan, Uthara

    2000-01-01

    A method of fabricating a micromachine includes the step of constructing a low surface energy film on the micromachine. The micromachine is then rinsed with a rinse liquid that has a high surface energy, relative to the low surface energy film, to produce a contact angle of greater than 90.degree. between the low surface energy film and the rinse liquid. This relatively large contact angle causes any rinse liquid on the micromachine to be displaced from the micromachine when the micromachine is removed from the rinse liquid. In other words, the micromachine is dried by dewetting from a liquid-based process. Thus, a separate evaporative drying step is not required, as the micromachine is removed from the liquid-based process in a dry state. The relatively large contact angle also operates to prevent attractive capillary forces between micromachine components, thereby preventing contact and adhesion between adjacent microstructure surfaces. The low surface energy film may be constructed with a fluorinated self-assembled monolayer film. The processing of the invention avoids the use of environmentally harmful, health-hazardous chemicals.

  10. Micromachining with copper lasers

    Science.gov (United States)

    Knowles, Martyn R. H.; Bell, Andy; Foster-Turner, Gideon; Rutterford, Graham; Chudzicki, J.; Kearsley, Andrew J.

    1997-04-01

    In recent years the copper laser has undergone extensive development and has emerged as a leading and unique laser for micromachining. The copper laser is a high average power (10 - 250 W), high pulse repetition rate (2 - 32 kHz), visible laser (511 nm and 578 nm) that produces high peak power (typically 200 kW), short pulses (30 ns) and very good beam quality (diffraction limited). This unique set of laser parameters results in exceptional micro-machining in a wide variety of materials. Typical examples of the capabilities of the copper laser include the drilling of small holes (10 - 200 micrometer diameter) in materials as diverse as steel, ceramic, diamond and polyimide with micron precision and low taper (less than 1 degree) cutting and profiling of diamond. Application of the copper laser covers the electronic, aerospace, automotive, nuclear, medical and precision engineering industries.

  11. Structure optimization and simulation analysis of the quartz micromachined gyroscope

    Directory of Open Access Journals (Sweden)

    Xuezhong Wu

    2014-02-01

    Full Text Available Structure optimization and simulation analysis of the quartz micromachined gyroscope are reported in this paper. The relationships between the structure parameters and the frequencies of work mode were analysed by finite element analysis. The structure parameters of the quartz micromachined gyroscope were optimized to reduce the difference between the frequencies of the drive mode and the sense mode. The simulation results were proved by testing the prototype gyroscope, which was fabricated by micro-electromechanical systems (MEMS technology. Therefore, the frequencies of the drive mode and the sense mode can match each other by the structure optimization and simulation analysis of the quartz micromachined gyroscope, which is helpful in the design of the high sensitivity quartz micromachined gyroscope.

  12. The micromachined logo of Atomki

    International Nuclear Information System (INIS)

    Rajta, I.; Szilasi, S.Z.

    2006-01-01

    Complete text of publication follows. Proton Beam Micromachining, also known as P-beam Writing, is a direct write 3- dimensional lithographic technique. Conventional resist types are PMMA (polymethylmethacrylate), and SU-8 (of MicroChem Corp.); they are positive and negative resists, respectively. In this work we used SU-8, the most common negative resist material. SU-8 was spun on a flat surface, typically Silicon or glass. A direct write proton beam was scanned over an arbitary structure (the Atomki logo can be replaced by any other structure), which produces chain scissioning in the polymer. Post exposure bake (PEB) is usually needed in case of conventional optical lithography, but using protons this bake is done in situ as the ions heat up the sample in vacuum. Subsequently chemical etching takes place, the solvent is available at MicroChem Corp. The schematic diagram of the above described micromachining process is shown on Fig. 1. The irradiation requires a scanning proton microbeam system equipped with suitable beam scanning and blanking facilities. This is available in the Institute, our setup has been upgraded from doublet to triplet focusing system (Oxford Microbeams Ltd.). For scanning we use a DIO card (PCI-6731 of National Instruments), and the IonScan software [1]. Sample preparation was carried out at our 'semi clean' room. This is also where chemical development of the samples and the optical microscopy have been done too. A Zeiss Axio Imager microscope is available (equipped with 5 objective lenses, 4 different contrast methods, transmitted or reflected light illumination). Fig. 2. shows a typical example of the Atomki logo. This is a bright field image, a number of different nice and colourful images can be produced with the other contrast techniques (for more images see the Institute website: http://www.atomki.hu/ ). (author)

  13. A silicon micromachined resonant pressure sensor

    International Nuclear Information System (INIS)

    Tang Zhangyang; Fan Shangchun; Cai Chenguang

    2009-01-01

    This paper describes the design, fabrication and test of a silicon micromachined resonant pressure sensor. A square membrane and a doubly clamped resonant beam constitute a compound structure. The former senses the pressure directly, while the latter changes its resonant frequency according to deformation of the membrane. The final output relation between the resonant frequency and the applied pressure is deducted according to the structure mechanical properties. Sensors are fabricated by micromachining technology, and then sealed in vaccum. These sensors are tested by open-loop and close-loop system designed on purpose. The experiment results demonstrate that the sensor has a sensitivity of 49.8Hz/kPa and repeatability of 0.08%.

  14. Micromachined capacitive ultrasonic immersion transducer array

    Science.gov (United States)

    Jin, Xuecheng

    Capacitive micromachined ultrasonic transducers (cMUTs) have emerged as an attractive alternative to conventional piezoelectric ultrasonic transducers. They offer performance advantages of wide bandwidth and sensitivity that have heretofore been attainable. In addition, micromachining technology, which has benefited from the fast-growing microelectronics industry, enables cMUT array fabrication and electronics integration. This thesis describes the design and fabrication of micromachined capacitive ultrasonic immersion transducer arrays. The basic transducer electrical equivalent circuit is derived from Mason's theory. The effects of Lamb waves and Stoneley waves on cross coupling and acoustic losses are discussed. Electrical parasitics such as series resistance and shunt capacitance are also included in the model of the transducer. Transducer fabrication technology is systematically studied. Device dimension control in both vertical and horizontal directions, process alternatives and variations in membrane formation, via etch and cavity sealing, and metalization as well as their impact on transducer performance are summarized. Both 64 and 128 element 1-D array transducers are fabricated. Transducers are characterized in terms of electrical input impedance, bandwidth, sensitivity, dynamic range, impulse response and angular response, and their performance is compared with theoretical simulation. Various schemes for cross coupling reduction is analyzed, implemented, and verified with both experiments and theory. Preliminary results of immersion imaging are presented using 64 elements 1-D array transducers for active source imaging.

  15. Trends in laser micromachining

    Science.gov (United States)

    Gaebler, Frank; van Nunen, Joris; Held, Andrew

    2016-03-01

    Laser Micromachining is well established in industry. Depending on the application lasers with pulse length from μseconds to femtoseconds and wavelengths from 1064nm and its harmonics up to 5μm or 10.6μm are used. Ultrafast laser machining using pulses with pico or femtosecond duration pulses is gaining traction, as it offers very precise processing of materials with low thermal impact. Large-scale industrial ultrafast laser applications show that the market can be divided into various sub segments. One set of applications demand low power around 10W, compact footprint and are extremely sensitive to the laser price whilst still demanding 10ps or shorter laser pulses. A second set of applications are very power hungry and only become economically feasible for large scale deployments at power levels in the 100+W class. There is also a growing demand for applications requiring fs-laser pulses. In our presentation we would like to describe these sub segments by using selected applications from the automotive and electronics industry e.g. drilling of gas/diesel injection nozzles, dicing of LED substrates. We close the presentation with an outlook to micromachining applications e.g. glass cutting and foil processing with unique new CO lasers emitting 5μm laser wavelength.

  16. UV laser micromachining of ceramic materials: formation of columnar topographies

    International Nuclear Information System (INIS)

    Oliveira, V.; Vilar, R.; Conde, O.

    2001-01-01

    Laser machining is increasingly appearing as an alternative for micromachining of ceramics. Using ceramic materials using excimer lasers can result in smooth surfaces or in the formation of cone-like or columnar topography. Potential applications of cone-shaped or columnar surface topography include, for example, light trapping in anti-reflection coatings and improvement of adhesion bonding between ceramic materials. In this communication results of a comparative study of surface topography change during micromachining of several ceramic materials with different ablation behaviors are reported. (orig.)

  17. Report on achievements in fiscal 1999. Research and development of micro-machine technologies (development of micro-factory technologies); 1999 nendo micro machine gijutsu no kenkyu kaihatsu seika hokokusho. Micro factory gijutsu kaihatsu

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    2000-03-01

    With an objective to achieve energy saving by micronizing the manufacturing processes of small industrial products, this research and development is intended to establish technologies to realize a micro-machine system, in which devices for processing, assembly, transportation and inspection used in the manufacturing processes are unified and incorporated in narrow spaces. Fiscal 1999 has performed, on the items of (1) research and development of the systematizing technologies and (2) comprehensive surveys and researches, with respect to the development of the first prototype system, and fabrication on the trial basis of devices to be mounted on the second prototype system, and discussions on further functional enhancement of the different devices. As a result in the research of the systematizing technology, the first prototype system was developed, that unifies the base unit fabricated in fiscal 1998, the electrolysis processing device, the fluid feeding device, the micro-arms, the coating device, the transportation device, and the environment recognizing device. The basic performances of the individual devices on the first prototype system were verified. Based on the result of this function verification, optimal design and fabrication on the trial basis of the devices mounted in the second prototype system were performed, and discussions were given on the further function enhancement in each functional device. (NEDO)

  18. Silicon-micromachined microchannel plates

    International Nuclear Information System (INIS)

    Beetz, Charles P.; Boerstler, Robert; Steinbeck, John; Lemieux, Bryan; Winn, David R.

    2000-01-01

    Microchannel plates (MCP) fabricated from standard silicon wafer substrates using a novel silicon micromachining process, together with standard silicon photolithographic process steps, are described. The resulting SiMCP microchannels have dimensions of ∼0.5 to ∼25 μm, with aspect ratios up to 300, and have the dimensional precision and absence of interstitial defects characteristic of photolithographic processing, compatible with positional matching to silicon electronics readouts. The open channel areal fraction and detection efficiency may exceed 90% on plates up to 300 mm in diameter. The resulting silicon substrates can be converted entirely to amorphous quartz (qMCP). The strip resistance and secondary emission are developed by controlled depositions of thin films, at temperatures up to 1200 deg. C, also compatible with high-temperature brazing, and can be essentially hydrogen, water and radionuclide-free. Novel secondary emitters and cesiated photocathodes can be high-temperature deposited or nucleated in the channels or the first strike surface. Results on resistivity, secondary emission and gain are presented

  19. Acceleration sensitivity of micromachined pressure sensors

    Science.gov (United States)

    August, Richard; Maudie, Theresa; Miller, Todd F.; Thompson, Erik

    1999-08-01

    Pressure sensors serve a variety of automotive applications, some which may experience high levels of acceleration such as tire pressure monitoring. To design pressure sensors for high acceleration environments it is important to understand their sensitivity to acceleration especially if thick encapsulation layers are used to isolate the device from the hostile environment in which they reside. This paper describes a modeling approach to determine their sensitivity to acceleration that is very general and is applicable to different device designs and configurations. It also describes the results of device testing of a capacitive surface micromachined pressure sensor at constant acceleration levels from 500 to 2000 g's.

  20. Energy conservation potential of surface modification technologies

    Energy Technology Data Exchange (ETDEWEB)

    Le, H.K.; Horne, D.M.; Silberglitt, R.S.

    1985-09-01

    This report assesses the energy conservation impact of surface modification technologies on the metalworking industries. The energy conservation impact of surface modification technologies on the metalworking industries is assessed by estimating their friction and wear tribological sinks and the subsequent reduction in these sinks when surface modified tools are used. Ion implantation, coatings, and laser and electron beam surface modifications are considered.

  1. Optical wireless communications for micromachines

    Science.gov (United States)

    O'Brien, Dominic C.; Yuan, Wei Wen; Liu, Jing Jing; Faulkner, Grahame E.; Elston, Steve J.; Collins, Steve; Parry-Jones, Lesley A.

    2006-08-01

    A key challenge for wireless sensor networks is minimizing the energy required for network nodes to communicate with each other, and this becomes acute for self-powered devices such as 'smart dust'. Optical communications is a potentially attractive solution for such devices. The University of Oxford is currently involved in a project to build optical wireless links to smart dust. Retro-reflectors combined with liquid crystal modulators can be integrated with the micro-machine to create a low power transceiver. When illuminated from a base station a modulated beam is returned, transmitting data. Data from the base station can be transmitted using modulation of the illuminating beam and a receiver at the micro-machine. In this paper we outline the energy consumption and link budget considerations in the design of such micro-machines, and report preliminary experimental results.

  2. Electron beam micromachining of plastics

    Czech Academy of Sciences Publication Activity Database

    Dupák, Libor

    2014-01-01

    Roč. 49, 5-6 (2014), s. 310-314 ISSN 0861-4717 R&D Projects: GA MŠk(CZ) LO1212; GA MŠk ED0017/01/01; GA MŠk EE.2.3.20.0103 Institutional support: RVO:68081731 Keywords : micromachining of plastics * Electron beam Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

  3. Design and development of a surface micro-machined push–pull-type true-time-delay phase shifter on an alumina substrate for Ka-band T/R module application

    International Nuclear Information System (INIS)

    Dey, Sukomal; Koul, Shiban K

    2012-01-01

    A radio frequency micro-electro-mechanical system (RF-MEMS) phase shifter based on the distributed MEMS transmission line (DMTL) concept towards maximum achievable phase shift with low actuation voltage with good figure of merit (FOM) is presented in this paper. This surface micro-machined analog DMTL phase shifter demonstrates low power consumption for implementation in a Ka-band transmit/receive (T/R) module. The push–pull-type switch has been designed and optimized with an analytical method and validated with simulation, which is the fundamental building block of the design of a true-time-delay phase shifter. Change in phase has been designed and optimized in push and pull states with reference to the up-state performance of the phase shifter. The working principle of this push–pull-type DMTL phase shifter has been comprehensively worked out. A thorough detail of the design and performance analysis of the phase shifter has been carried out with various structural parameters using commercially available simulation tools with reference to a change in phase shift and has been verified using a system level simulation. The phase shifter is fabricated on the alumina substrate, using a suspended gold bridge membrane with a surface micromachining process. Asymmetric behaviour of push–pull bridge configuration has been noted and a corresponding effect on mechanical, electrical and RF performances has been extensively investigated. It is demonstrated 114° dB −1 FOM over 0–40 GHz band, which is the highest achievable FOM from a unit cell on an alumina substrate reported so far. A complete phase shifter contributes to a continuous differential phase shift of 0°–360° over 0–40 GHz band with a minimum actuation voltage of 8.1 V which is the highest achievable phase shift with the lowest actuation voltage as per till date on the alumina substrate with good repeatability and return loss better than 11.5 dB over 0–40 GHz band. (paper)

  4. Micromachined thin-film sensors for SOI-CMOS co-integration

    CERN Document Server

    Laconte, Jean; Raskin, Jean-Pierre

    2006-01-01

    Co-integration of MEMS and MOS in SOI technology is promising and well demonstrated hereThe impact of Micromachining on SOI devices is deeply analyzed for the first timeInclude extensive TMAH etching, residual stress, microheaters, gas-flow sensors reviewResidual stresses in thin films need to be more and more monitored in MEMS designsTMAH micromachining is an attractive alternative to KOH.

  5. Quasimetallic silicon micromachined photonic crystals

    International Nuclear Information System (INIS)

    Temelkuran, B.; Bayindir, Mehmet; Ozbay, E.; Kavanaugh, J. P.; Sigalas, M. M.; Tuttle, G.

    2001-01-01

    We report on fabrication of a layer-by-layer photonic crystal using highly doped silicon wafers processed by semiconductor micromachining techniques. The crystals, built using (100) silicon wafers, resulted in an upper stop band edge at 100 GHz. The transmission and defect characteristics of these structures were found to be analogous to metallic photonic crystals. We also investigated the effect of doping concentration on the defect characteristics. The experimental results agree well with predictions of the transfer matrix method simulations

  6. Resist materials for proton micromachining

    International Nuclear Information System (INIS)

    Kan, J.A. van; Sanchez, J.L.; Xu, B.; Osipowicz, T.; Watt, F.

    1999-01-01

    The production of high aspect ratio microstructures is a potential growth area. The combination of deep X-ray lithography with electroforming and micromolding (i.e. LIGA) is one of the main techniques used to produce 3D microstructures. The new technique of proton micromachining employs focused MeV protons in a direct write process which is complementary to LIGA, e.g. micromachining with 2 MeV protons results in microstructures with a height of 63 μm and lateral sub-micrometer resolution in PMMA resist. The aim of this paper is to investigate the capabilities of proton micromachining as a lithographic technique. This involves the study of different types of resists. The dose distribution of high molecular weight PMMA is compared with three other types of resist: First the positive photo resist AZ P4620 will be discussed and then PMGI SF 23, which can be used as a deep UV, e-beam or X-ray resist. Finally SU-8, a new deep UV negative type of chemically amplified resist will be discussed. All these polymers are applied using the spin coating technique at thicknesses of between 1 and 36 μm

  7. Biasing of Capacitive Micromachined Ultrasonic Transducers.

    Science.gov (United States)

    Caliano, Giosue; Matrone, Giulia; Savoia, Alessandro Stuart

    2017-02-01

    Capacitive micromachined ultrasonic transducers (CMUTs) represent an effective alternative to piezoelectric transducers for medical ultrasound imaging applications. They are microelectromechanical devices fabricated using silicon micromachining techniques, developed in the last two decades in many laboratories. The interest for this novel transducer technology relies on its full compatibility with standard integrated circuit technology that makes it possible to integrate on the same chip the transducers and the electronics, thus enabling the realization of extremely low-cost and high-performance devices, including both 1-D or 2-D arrays. Being capacitive transducers, CMUTs require a high bias voltage to be properly operated in pulse-echo imaging applications. The typical bias supply residual ripple of high-quality high-voltage (HV) generators is in the millivolt range, which is comparable with the amplitude of the received echo signals, and it is particularly difficult to minimize. The aim of this paper is to analyze the classical CMUT biasing circuits, highlighting the features of each one, and to propose two novel HV generator architectures optimized for CMUT biasing applications. The first circuit proposed is an ultralow-residual ripple (generator that uses an extremely stable sinusoidal power oscillator topology. The second circuit employs a commercially available integrated step-up converter characterized by a particularly efficient switching topology. The circuit is used to bias the CMUT by charging a buffer capacitor synchronously with the pulsing sequence, thus reducing the impact of the switching noise on the received echo signals. The small area of the circuit (about 1.5 cm 2 ) makes it possible to generate the bias voltage inside the probe, very close to the CMUT, making the proposed solution attractive for portable applications. Measurements and experiments are shown to demonstrate the effectiveness of the new approaches presented.

  8. Laser micromachining of sputtered DLC films

    International Nuclear Information System (INIS)

    Fu, Y.Q.; Luo, J.K.; Flewitt, A.J.; Ong, S.E.; Zhang, S.; Milne, W.I.

    2006-01-01

    DLC films with different thicknesses (from 100 nm to 1.9 μm) were deposited using sputtering of graphite target in pure argon atmosphere without substrate heating. Film microstructures (sp 2 /sp 3 ratio) and mechanical properties (modulus, hardness, stress) were characterized as a function of film thickness. A thin layer of aluminum about 60 nm was deposited on the DLC film surface. Laser micromachining of Al/DLC layer was performed to form microcantilever structures, which were released using a reactive ion etching system with SF 6 plasma. Due to the intrinsic stress in DLC films and bimorph Al/DLC structure, the microcantilevers bent up with different curvatures. For DLC film of 100 nm thick, the cantilever even formed microtubes. The relationship between the bimorph beam bending and DLC film properties (such as stress, modulus, etc.) were discussed in details

  9. Fabrication of a novel quartz micromachined gyroscope

    Science.gov (United States)

    Xie, Liqiang; Xing, Jianchun; Wang, Haoxu; Wu, Xuezhong

    2015-04-01

    A novel quartz micromachined gyroscope is proposed in this paper. The novel gyroscope is realized by quartz anisotropic wet etching and 3-dimensional electrodes deposition. In the quartz wet etching process, the quality of Cr/Au mask films affecting the process are studied by experiment. An excellent mask film with 100 Å Cr and 2000 Å Au is achieved by optimization of experimental parameters. Crystal facets after etching seriously affect the following sidewall electrodes deposition process and the structure's mechanical behaviours. Removal of crystal facets is successfully implemented by increasing etching time based on etching rate ratios between facets and crystal planes. In the electrodes deposition process, an aperture mask evaporation method is employed to prepare electrodes on 3-dimensional surfaces of the gyroscope structure. The alignments among the aperture masks are realized by the ABM™ Mask Aligner System. Based on the processes described above, a z-axis quartz gyroscope is fabricated successfully.

  10. Analysis and prediction of dimensions and cost of laser micro-machining internal channel fabrication process

    Directory of Open Access Journals (Sweden)

    Brabazon D.

    2010-06-01

    Full Text Available This paper presents the utilisation of Response Surface Methodology (RSM as the prediction tool for the laser micro-machining process. Laser internal microchannels machined using pulsed Nd:YVO4 laser in polycarbonate were investigated. The experiments were carried out according to 33 factorial Design of Experiment (DoE. In this work the three input process set as control parameters were laser power, P; pulse repetition frequency, PRF; and sample translation speed, U. Measured responses were the channel width and the micro-machining operating cost per metre of produced microchannels. The responses were sufficiently predicted within the set micro-machining parameters limits. Two factorial interaction (2FI and quadratic polynomial regression equations for both responses were constructed. It is proposed that the developed prediction equations can be used to find locally optimal micro-machining process parameters under experimental and operational conditions.

  11. Micromachined single-level nonplanar polycrystalline SiGe thermal microemitters for infrared dynamic scene projection

    Science.gov (United States)

    Malyutenko, V. K.; Malyutenko, O. Yu.; Leonov, V.; Van Hoof, C.

    2009-05-01

    The technology for self-supported membraneless polycrystalline SiGe thermal microemitters, their design, and performance are presented. The 128-element arrays with a fill factor of 88% and a 2.5-μm-thick resonant cavity have been grown by low-pressure chemical vapor deposition and fabricated using surface micromachining technology. The 200-nm-thick 60×60 μm2 emitting pixels enforced with a U-shape profile pattern demonstrate a thermal time constant of 2-7 ms and an apparent temperature of 700 K in the 3-5 and 8-12 μm atmospheric transparency windows. The application of the devices to the infrared dynamic scene simulation and their benefit over conventional planar membrane-supported emitters are discussed.

  12. New applications of surface plasmon resonance technology

    International Nuclear Information System (INIS)

    Zhang Tianhao; Yin Meirong; Fang Zheyu; Yang Haidong; Yang Jia; Yang Huizhan; Kang Huizhen; Yang Dapeng; Lu Yanzhen

    2005-01-01

    Surface plasmon resonance technology is reviewed and its new applications in various fields are described. These fields include surface plasmon resonance sensors, near-field scanning optical microscopy, thin film optics and thickness measurement, holography, precise measurement of angles, and Q switching. (authors)

  13. Silicon micromachining using a high-density plasma source

    International Nuclear Information System (INIS)

    McAuley, S.A.; Ashraf, H.; Atabo, L.; Chambers, A.; Hall, S.; Hopkins, J.; Nicholls, G.

    2001-01-01

    Dry etching of Si is critical in satisfying the demands of the micromachining industry. The micro-electro-mechanical systems (MEMS) community requires etches capable of high aspect ratios, vertical profiles, good feature size control and etch uniformity along with high throughput to satisfy production requirements. Surface technology systems' (STS's) high-density inductively coupled plasma (ICP) etch tool enables a wide range of applications to be realized whilst optimizing the above parameters. Components manufactured from Si using an STS ICP include accelerometers and gyroscopes for military, automotive and domestic applications. STS's advanced silicon etch (ASE TM ) has also allowed the first generation of MEMS-based optical switches and attenuators to reach the marketplace. In addition, a specialized application for fabricating the next generation photolithography exposure masks has been optimized for 200 mm diameter wafers, to depths of ∼750 μm. Where the profile is not critical, etch rates of greater than 8 μm min -1 have been realized to replace previous methods such as wet etching. This is also the case for printer applications. Specialized applications that require etching down to pyrex or oxide often result in the loss of feature size control at the interface; this is an industry wide problem. STS have developed a technique to address this. The rapid progression of the industry has led to development of the STS ICP etch tool, as well as the process. (author)

  14. Micro-machined calorimetric biosensors

    Science.gov (United States)

    Doktycz, Mitchel J.; Britton, Jr., Charles L.; Smith, Stephen F.; Oden, Patrick I.; Bryan, William L.; Moore, James A.; Thundat, Thomas G.; Warmack, Robert J.

    2002-01-01

    A method and apparatus are provided for detecting and monitoring micro-volumetric enthalpic changes caused by molecular reactions. Micro-machining techniques are used to create very small thermally isolated masses incorporating temperature-sensitive circuitry. The thermally isolated masses are provided with a molecular layer or coating, and the temperature-sensitive circuitry provides an indication when the molecules of the coating are involved in an enthalpic reaction. The thermally isolated masses may be provided singly or in arrays and, in the latter case, the molecular coatings may differ to provide qualitative and/or quantitative assays of a substance.

  15. Micromachined Polycrystalline Si Thermopiles in a T-shirt

    Directory of Open Access Journals (Sweden)

    Vladimir Leonov

    2011-04-01

    Full Text Available The technology for in-plane poly-Si thermopiles has been developed. The bulk-micromachined thermopiles are located between two Si bars and connected thermally with those bars through thin-film thermal shunts. The patterned strips of thermocouple material together with thermal shunts form bridges between Si bars. Two versions of a thermoelectric generator (TEG with micromachined thermopiles have been assembled and tested on a person’s wrist, and when integrated in a T-shirt. The TEG still produces less than 1 μW in the office, but at ambient temperatures below 11-13 °C it produces more than 1 μW at a voltage of more than 2 V on the matched load. The new way of integration of wearable TEG in clothing is shown. The TEG is located under the textile, and the fabric is used as a flexible radiator.

  16. High speed micromachining with high power UV laser

    Science.gov (United States)

    Patel, Rajesh S.; Bovatsek, James M.

    2013-03-01

    Increasing demand for creating fine features with high accuracy in manufacturing of electronic mobile devices has fueled growth for lasers in manufacturing. High power, high repetition rate ultraviolet (UV) lasers provide an opportunity to implement a cost effective high quality, high throughput micromachining process in a 24/7 manufacturing environment. The energy available per pulse and the pulse repetition frequency (PRF) of diode pumped solid state (DPSS) nanosecond UV lasers have increased steadily over the years. Efficient use of the available energy from a laser is important to generate accurate fine features at a high speed with high quality. To achieve maximum material removal and minimal thermal damage for any laser micromachining application, use of the optimal process parameters including energy density or fluence (J/cm2), pulse width, and repetition rate is important. In this study we present a new high power, high PRF QuasarR 355-40 laser from Spectra-Physics with TimeShiftTM technology for unique software adjustable pulse width, pulse splitting, and pulse shaping capabilities. The benefits of these features for micromachining include improved throughput and quality. Specific example and results of silicon scribing are described to demonstrate the processing benefits of the Quasar's available power, PRF, and TimeShift technology.

  17. Silicon Micromachined Microlens Array for THz Antennas

    Science.gov (United States)

    Lee, Choonsup; Chattopadhyay, Goutam; Mehdi, IImran; Gill, John J.; Jung-Kubiak, Cecile D.; Llombart, Nuria

    2013-01-01

    5 5 silicon microlens array was developed using a silicon micromachining technique for a silicon-based THz antenna array. The feature of the silicon micromachining technique enables one to microfabricate an unlimited number of microlens arrays at one time with good uniformity on a silicon wafer. This technique will resolve one of the key issues in building a THz camera, which is to integrate antennas in a detector array. The conventional approach of building single-pixel receivers and stacking them to form a multi-pixel receiver is not suited at THz because a single-pixel receiver already has difficulty fitting into mass, volume, and power budgets, especially in space applications. In this proposed technique, one has controllability on both diameter and curvature of a silicon microlens. First of all, the diameter of microlens depends on how thick photoresist one could coat and pattern. So far, the diameter of a 6- mm photoresist microlens with 400 m in height has been successfully microfabricated. Based on current researchers experiences, a diameter larger than 1-cm photoresist microlens array would be feasible. In order to control the curvature of the microlens, the following process variables could be used: 1. Amount of photoresist: It determines the curvature of the photoresist microlens. Since the photoresist lens is transferred onto the silicon substrate, it will directly control the curvature of the silicon microlens. 2. Etching selectivity between photoresist and silicon: The photoresist microlens is formed by thermal reflow. In order to transfer the exact photoresist curvature onto silicon, there needs to be etching selectivity of 1:1 between silicon and photoresist. However, by varying the etching selectivity, one could control the curvature of the silicon microlens. The figure shows the microfabricated silicon microlens 5 x5 array. The diameter of the microlens located in the center is about 2.5 mm. The measured 3-D profile of the microlens surface has a

  18. Micro-machined resonator oscillator

    Science.gov (United States)

    Koehler, Dale R.; Sniegowski, Jeffry J.; Bivens, Hugh M.; Wessendorf, Kurt O.

    1994-01-01

    A micro-miniature resonator-oscillator is disclosed. Due to the miniaturization of the resonator-oscillator, oscillation frequencies of one MHz and higher are utilized. A thickness-mode quartz resonator housed in a micro-machined silicon package and operated as a "telemetered sensor beacon" that is, a digital, self-powered, remote, parameter measuring-transmitter in the FM-band. The resonator design uses trapped energy principles and temperature dependence methodology through crystal orientation control, with operation in the 20-100 MHz range. High volume batch-processing manufacturing is utilized, with package and resonator assembly at the wafer level. Unique design features include squeeze-film damping for robust vibration and shock performance, capacitive coupling through micro-machined diaphragms allowing resonator excitation at the package exterior, circuit integration and extremely small (0.1 in. square) dimensioning. A family of micro-miniature sensor beacons is also disclosed with widespread applications as bio-medical sensors, vehicle status monitors and high-volume animal identification and health sensors. The sensor family allows measurement of temperatures, chemicals, acceleration and pressure. A microphone and clock realization is also available.

  19. Lunar Surface Systems Supportability Technology Development Roadmap

    Science.gov (United States)

    Oeftering, Richard C.; Struk, Peter M.; Green, Jennifer L.; Chau, Savio N.; Curell, Philip C.; Dempsey, Cathy A.; Patterson, Linda P.; Robbins, William; Steele, Michael A.; DAnnunzio, Anthony; hide

    2011-01-01

    The Lunar Surface Systems Supportability Technology Development Roadmap is a guide for developing the technologies needed to enable the supportable, sustainable, and affordable exploration of the Moon and other destinations beyond Earth. Supportability is defined in terms of space maintenance, repair, and related logistics. This report considers the supportability lessons learned from NASA and the Department of Defense. Lunar Outpost supportability needs are summarized, and a supportability technology strategy is established to make the transition from high logistics dependence to logistics independence. This strategy will enable flight crews to act effectively to respond to problems and exploit opportunities in an environment of extreme resource scarcity and isolation. The supportability roadmap defines the general technology selection criteria. Technologies are organized into three categories: diagnostics, test, and verification; maintenance and repair; and scavenge and recycle. Furthermore, "embedded technologies" and "process technologies" are used to designate distinct technology types with different development cycles. The roadmap examines the current technology readiness level and lays out a four-phase incremental development schedule with selection decision gates. The supportability technology roadmap is intended to develop technologies with the widest possible capability and utility while minimizing the impact on crew time and training and remaining within the time and cost constraints of the program.

  20. Fission Surface Power Technology Development Update

    Science.gov (United States)

    Palac, Donald T.; Mason, Lee S.; Houts, Michael G.; Harlow, Scott

    2011-01-01

    Power is a critical consideration in planning exploration of the surfaces of the Moon, Mars, and places beyond. Nuclear power is an important option, especially for locations in the solar system where sunlight is limited or environmental conditions are challenging (e.g., extreme cold, dust storms). NASA and the Department of Energy are maintaining the option for fission surface power for the Moon and Mars by developing and demonstrating technology for a fission surface power system. The Fission Surface Power Systems project has focused on subscale component and subsystem demonstrations to address the feasibility of a low-risk, low-cost approach to space nuclear power for surface missions. Laboratory demonstrations of the liquid metal pump, reactor control drum drive, power conversion, heat rejection, and power management and distribution technologies have validated that the fundamental characteristics and performance of these components and subsystems are consistent with a Fission Surface Power preliminary reference concept. In addition, subscale versions of a non-nuclear reactor simulator, using electric resistance heating in place of the reactor fuel, have been built and operated with liquid metal sodium-potassium and helium/xenon gas heat transfer loops, demonstrating the viability of establishing system-level performance and characteristics of fission surface power technologies without requiring a nuclear reactor. While some component and subsystem testing will continue through 2011 and beyond, the results to date provide sufficient confidence to proceed with system level technology readiness demonstration. To demonstrate the system level readiness of fission surface power in an operationally relevant environment (the primary goal of the Fission Surface Power Systems project), a full scale, 1/4 power Technology Demonstration Unit (TDU) is under development. The TDU will consist of a non-nuclear reactor simulator, a sodium-potassium heat transfer loop, a power

  1. High lane density slab-gel electrophoresis using micromachined instrumentation.

    Science.gov (United States)

    Papautsky, I; Mohanty, S; Weiss, R; Frazier, A B

    2001-10-01

    In this paper, micromachined pipette arrays (MPAs) and microcombs were studied as a means of enabling high lane density gel electrophoresis. The MPA provide a miniaturized format to interface sub-microliter volumes of samples between macroscale sample preparation formats and microscale biochemical analysis systems. The microcombs provide a means of creating sample loading wells in the gel material on the same center-to-center spacing as the MPAs. Together, the two micromachined instruments provide an alternative to current combs and pipetting technologies used for creating sample loading wells and sample delivery in gel electrophoresis systems. Using three designs for the microcomb-MPA pair, center-to-center spacings of 1.0 mm, 500 microm, and 250 microm are studied. The results demonstrate an approximate 10-fold increase in lane density and a 10-fold reduction in sample size from 5 microL to 500 pL. As a result, the number of theoretical plates has increased 2.5-fold, while system resolution has increased 1.5-fold over the conventional agarose gel systems. An examination of changes in resolution across the width of individual separation lanes in both systems revealed dependence in the case of the conventional gels and no dependence for the gels loaded with the micromachined instrumentation.

  2. Silicon-micromachined microchannel plates

    CERN Document Server

    Beetz, C P; Steinbeck, J; Lemieux, B; Winn, D R

    2000-01-01

    Microchannel plates (MCP) fabricated from standard silicon wafer substrates using a novel silicon micromachining process, together with standard silicon photolithographic process steps, are described. The resulting SiMCP microchannels have dimensions of approx 0.5 to approx 25 mu m, with aspect ratios up to 300, and have the dimensional precision and absence of interstitial defects characteristic of photolithographic processing, compatible with positional matching to silicon electronics readouts. The open channel areal fraction and detection efficiency may exceed 90% on plates up to 300 mm in diameter. The resulting silicon substrates can be converted entirely to amorphous quartz (qMCP). The strip resistance and secondary emission are developed by controlled depositions of thin films, at temperatures up to 1200 deg. C, also compatible with high-temperature brazing, and can be essentially hydrogen, water and radionuclide-free. Novel secondary emitters and cesiated photocathodes can be high-temperature deposite...

  3. Micromachined Integrated Transducers for Ultrasound Imaging

    DEFF Research Database (Denmark)

    la Cour, Mette Funding

    The purpose of this project is to develop capacitive micromachined ultrasonic transducers (CMUTs) for medical imaging. Medical ultrasound transducers used today are fabricated using piezoelectric materials and bulk processing. To fabricate transducers capable of delivering a higher imaging...

  4. Apparatus for precision micromachining with lasers

    Science.gov (United States)

    Chang, J.J.; Dragon, E.P.; Warner, B.E.

    1998-04-28

    A new material processing apparatus using a short-pulsed, high-repetition-rate visible laser for precision micromachining utilizes a near diffraction limited laser, a high-speed precision two-axis tilt-mirror for steering the laser beam, an optical system for either focusing or imaging the laser beam on the part, and a part holder that may consist of a cover plate and a back plate. The system is generally useful for precision drilling, cutting, milling and polishing of metals and ceramics, and has broad application in manufacturing precision components. Precision machining has been demonstrated through percussion drilling and trepanning using this system. With a 30 W copper vapor laser running at multi-kHz pulse repetition frequency, straight parallel holes with size varying from 500 microns to less than 25 microns and with aspect ratios up to 1:40 have been consistently drilled with good surface finish on a variety of metals. Micromilling and microdrilling on ceramics using a 250 W copper vapor laser have also been demonstrated with good results. Materialographic sections of machined parts show little (submicron scale) recast layer and heat affected zone. 1 fig.

  5. Micromachining Lithium Niobate for Rapid Prototyping of Resonant Biosensors

    International Nuclear Information System (INIS)

    Al-Shibaany, Zeyad Yousif Abdoon; Hedley, John; Huo, Dehong; Hu, Zhongxu

    2014-01-01

    Lithium niobate material is widely used in MEMS application due to its piezoelectric properties. This paper presents the micromachining process of lithium niobate to rapid prototype a resonant biosensor design. A high precision CNC machine was used to machine a sample of lithium niobate material at 5 different spindle speeds to find out the best conditions to machine this brittle material. A qualitative visual check of the surface was performed by using scanning electron microscopy, surface roughness was quantitatively investigated using an optical surface profiler and Raman spectroscopy to check the strain of the surface. Results show that the surface quality of the lithium niobate was significantly affected by the spindle speed with optimum conditions at 70k rpm giving a strained surface with 500 nm rms roughness

  6. Demonstration of superconducting micromachined cavities

    Energy Technology Data Exchange (ETDEWEB)

    Brecht, T., E-mail: teresa.brecht@yale.edu; Reagor, M.; Chu, Y.; Pfaff, W.; Wang, C.; Frunzio, L.; Devoret, M. H.; Schoelkopf, R. J. [Department of Applied Physics, Yale University, New Haven, Connecticut 06511 (United States)

    2015-11-09

    Superconducting enclosures will be key components of scalable quantum computing devices based on circuit quantum electrodynamics. Within a densely integrated device, they can protect qubits from noise and serve as quantum memory units. Whether constructed by machining bulk pieces of metal or microfabricating wafers, 3D enclosures are typically assembled from two or more parts. The resulting seams potentially dissipate crossing currents and limit performance. In this letter, we present measured quality factors of superconducting cavity resonators of several materials, dimensions, and seam locations. We observe that superconducting indium can be a low-loss RF conductor and form low-loss seams. Leveraging this, we create a superconducting micromachined resonator with indium that has a quality factor of two million, despite a greatly reduced mode volume. Inter-layer coupling to this type of resonator is achieved by an aperture located under a planar transmission line. The described techniques demonstrate a proof-of-principle for multilayer microwave integrated quantum circuits for scalable quantum computing.

  7. Physics-based signal processing algorithms for micromachined cantilever arrays

    Science.gov (United States)

    Candy, James V; Clague, David S; Lee, Christopher L; Rudd, Robert E; Burnham, Alan K; Tringe, Joseph W

    2013-11-19

    A method of using physics-based signal processing algorithms for micromachined cantilever arrays. The methods utilize deflection of a micromachined cantilever that represents the chemical, biological, or physical element being detected. One embodiment of the method comprises the steps of modeling the deflection of the micromachined cantilever producing a deflection model, sensing the deflection of the micromachined cantilever and producing a signal representing the deflection, and comparing the signal representing the deflection with the deflection model.

  8. Micromachined Microwave Cavity Resonator Filters for 5G: a Feasibility Study

    NARCIS (Netherlands)

    Kemenade, van R.; Smolders, A.B.; Hon, de B.P.

    2015-01-01

    Micromachined microwave cavity filters offer a light-weight, high-Q and highly integrated alternative in the frequency range of 20 GHz–100 GHz as compared to conventional filter types. The filter technology shows potential for use in 5G portable devices and as such, the design of a duplexer

  9. A sub-cm micromachined electron microscope

    Science.gov (United States)

    Feinerman, A. D.; Crewe, D. A.; Perng, D. C.; Shoaf, S. E.; Crewe, A. V.

    1993-01-01

    A new approach for fabricating macroscopic (approximately 10x10x10 mm(exp 3)) structures with micron accuracy has been developed. This approach combines the precision of semiconductor processing and fiber optic technologies. A (100) silicon wafer is anisotropically etched to create four orthogonal v-grooves and an aperture on each 10x12 mm die. Precision 308 micron optical fibers are sandwiched between the die to align the v-grooves. The fiber is then anodically bonded to the die above and below it. This procedure is repeated to create thick structures and a stack of 5 or 6 die will be used to create a miniature scanning electron microscope (MSEM). Two die in the structure will have a segmented electrode to deflect the beam and correct for astigmatism. The entire structure is UHV compatible. The performance of an SEM improves as its length is reduced and a sub-cm 2 keV MSEM with a field emission source should have approximately 1 nm resolution. A low voltage high resolution MSEM would be useful for the examination of biological specimens and semiconductors with a minimum of damage. The first MSEM will be tested with existing 6 micron thermionic sources. In the future a micromachined field emission source will be used. The stacking technology presented in this paper can produce an array of MSEMs 1 to 30 mm in length with a 1 mm or larger period. A key question being addressed by this research is the optimum size for a low voltage MSEM which will be determined by the required spatial resolution, field of view, and working distance.

  10. Characterization and modeling of 2D-glass micro-machining by spark-assisted chemical engraving (SACE) with constant velocity

    International Nuclear Information System (INIS)

    Didar, Tohid Fatanat; Dolatabadi, Ali; Wüthrich, Rolf

    2008-01-01

    Spark-assisted chemical engraving (SACE) is an unconventional micro-machining technology based on electrochemical discharge used for micro-machining nonconductive materials. SACE 2D micro-machining with constant speed was used to machine micro-channels in glass. Parameters affecting the quality and geometry of the micro-channels machined by SACE technology with constant velocity were presented and the effect of each of the parameters was assessed. The effect of chemical etching on the geometry of micro-channels under different machining conditions has been studied, and a model is proposed for characterization of the micro-channels as a function of machining voltage and applied speed

  11. Cryogenically assisted abrasive jet micromachining of polymers

    International Nuclear Information System (INIS)

    Getu, H; Papini, M; Spelt, J K

    2008-01-01

    The abrasive jet micromachining (AJM) of elastomers and polymers such as polydimethylsiloxane (PDMS), acrylonitrile butadiene styrene (ABS) and polytetrafluoroethylene (PTFE) for use in micro-fluidic devices was found to be very slow or impossible at room temperature. To enhance the material removal rate in such materials, a stream of liquid nitrogen (LN 2 ) was injected into the abrasive jet, cooling the target to cryogenic temperatures. Erosion rate measurements on the three polymeric materials (PDMS, ABS and PTFE) with and without the use of LN 2 were compared along with the profiles of micromachined channels and holes. It was found that the use of LN 2 cooling caused brittle erosion in PDMS, allowing it to be micromachined successfully. An erosion rate increase was also observed in PTFE and ABS at high and intermediate impact angles. The use of LN 2 also was found to reduce particle embedding

  12. New developments in surface technology and prototyping

    Science.gov (United States)

    Himmer, Thomas; Beyer, Eckhard

    2003-03-01

    Novel lightweight applications in the automotive and aircraft industries require advanced materials and techniques for surface protection as well as direct and rapid manufacturing of the related components and tools. The manufacturing processes presented in this paper are based on multiple additive and subtractive technologies such as laser cutting, laser welding, direct laser metal deposition, laser/plasma hybrid spraying technique or CNC milling. The process chain is similar to layer-based Rapid Prototyping Techniques. In the first step, the 3D CAD geometry is sliced into layers by a specially developed software. These slices are cut by high speed laser cutting and then joined together. In this way laminated tools or parts are built. To improve surface quality and to increase wear resistance a CNC machining center is used. The system consists of a CNC milling machine, in which a 3 kW Nd:YAG laser, a coaxial powder nozzle and a digitizing system are integrated. Using a new laser/plasma hybrid spraying technique, coatings can be deposited onto parts for surface protection. The layers show a low porosity and high adhesion strength, the thickness is up to 0.3 mm, and the lower effort for preliminary surface preparation reduces time and costs of the whole process.

  13. Sensors and Micromachined Devices for the Automotive and New Markets: The Delphi Delco Electronics MEMS Story.

    Science.gov (United States)

    Logsdon, James

    2002-03-01

    This presentation will provide a brief history of the development of MEMS products and technology, beginning with the manifold absolute pressure sensor in the late seventies through the current variety of Delphi Delco Electronics sensors available today. The technology development of micromachining from uncompensated P plus etch stops to deep reactive ion etching and the technology development of wafer level packaging from electrostatic bonding to glass frit sealing and silicon to silicon direct bonding will be reviewed.

  14. Influence of micromachined targets on laser accelerated proton beam profiles

    Science.gov (United States)

    Dalui, Malay; Permogorov, Alexander; Pahl, Hannes; Persson, Anders; Wahlström, Claes-Göran

    2018-03-01

    High intensity laser-driven proton acceleration from micromachined targets is studied experimentally in the target-normal-sheath-acceleration regime. Conical pits are created on the front surface of flat aluminium foils of initial thickness 12.5 and 3 μm using series of low energy pulses (0.5-2.5 μJ). Proton acceleration from such micromachined targets is compared with flat foils of equivalent thickness at a laser intensity of 7 × 1019 W cm-2. The maximum proton energy obtained from targets machined from 12.5 μm thick foils is found to be slightly lower than that of flat foils of equivalent remaining thickness, and the angular divergence of the proton beam is observed to increase as the depth of the pit approaches the foil thickness. Targets machined from 3 μm thick foils, on the other hand, show evidence of increasing the maximum proton energy when the depths of the structures are small. Furthermore, shallow pits on 3 μm thick foils are found to be efficient in reducing the proton beam divergence by a factor of up to three compared to that obtained from flat foils, while maintaining the maximum proton energy.

  15. Direct writing of microtunnels using proton beam micromachining

    International Nuclear Information System (INIS)

    Marot, Laurent; Munnik, Frans; Mikhailov, Serguei

    2006-01-01

    The production of high aspect ratio microstructures is a potential growth area. The combination of deep X-ray lithography with electroforming and micromolding (i.e. LIGA) is one of the main techniques used to produce 3D microstructures. The new technique of proton micromachining employs focused MeV protons in a direct write process which is complementary to LIGA. During ion exposure of positive photoresist like PMMA, scission of molecular chains occurs. These degraded polymer chains are removed by the developer. The aim of this paper is to investigate the capabilities of proton micromachining as a lithographic technique. We show the realization of sub-surface channels, or microtunnels, which have been fabricated in only one exposure and without cutting or resurfacing the material. Using our Van-de-Graaff accelerator, the resist (PMMA) has been exposed with high-energy protons (2.5 MeV). The range of charged particles in matter is well-defined and depends on the energy. Therefore, it is possible to obtain a dose which is sufficient to develop the bottom part of the ion paths but not the top part. Thus, by selecting the energy and the exposure time, a big variety of microtunnels can be realized

  16. Surface cleaning in thin film technology

    International Nuclear Information System (INIS)

    Mattox, D.M.

    1978-01-01

    A ''clean surface'' is one that contains no significant amounts of undesirable material. This paper discusses the types and origin of various contaminants. Since cleaning is often equated with adhesion, the mechanisms of adhesion to oxide, metal, and organic surfaces are reviewed and cleaning processes for these surfaces are outlined. Techniques for monitoring surface cleaning are presented, and the importance of storage of clean surfaces is discussed. An extensive bibliography is given. 4 figs., 89 references

  17. Discretely tunable micromachined injection-locked lasers

    International Nuclear Information System (INIS)

    Cai, H; Yu, M B; Lo, G Q; Kwong, D L; Zhang, X M; Liu, A Q; Liu, B

    2010-01-01

    This paper reports a micromachined injection-locked laser (ILL) to provide tunable discrete wavelengths. It utilizes a non-continuously tunable laser as the master to lock a Fabry–Pérot semiconductor laser chip. Both lasers are integrated into a deep-etched silicon chip with dimensions of 3 mm × 3 mm × 0.8 mm. Based on the experimental results, significant improvements in the optical power and spectral purity have been achieved in the fully locked state, and optical hysteresis and bistability have also been observed in response to the changes of the output wavelength and optical power of the master laser. As a whole system, the micromachined ILL is able to provide single mode, discrete wavelength tuning, high power and direct modulation with small size and single-chip solution, making it promising for advanced optical communications such as wavelength division multiplexing optical access networks.

  18. Model Design of Piezoelectric Micromachined Modal Gyroscope

    Directory of Open Access Journals (Sweden)

    Xiaojun Hu

    2011-01-01

    Full Text Available This paper reports a novel kind of solid-state microgyroscope, which is called piezoelectric micromachined modal gyroscope (PMMG. PMMG has large stiffness and robust resistance to shake and strike because there is no evident mass-spring component in its structure. This work focused on quantitative optimization of the gyroscope, which is still blank for such gyroscope. The modal analysis by the finite element method (FEM was firstly conducted. A set of quantitative indicators were developed to optimize the operation mode. By FEM, the harmonic analysis was conducted to find the way to efficiently actuate the operational mode needed. The optimal configuration of driving electrodes was obtained. At last, the Coriolis analysis was conducted to show the relation between angular velocity and differential output voltage by the Coriolis force under working condition. The results obtained in this paper provide theoretical basis for realizing this novel kind of micromachined gyroscope.

  19. Micro benchtop optics by bulk silicon micromachining

    Science.gov (United States)

    Lee, Abraham P.; Pocha, Michael D.; McConaghy, Charles F.; Deri, Robert J.

    2000-01-01

    Micromachining of bulk silicon utilizing the parallel etching characteristics of bulk silicon and integrating the parallel etch planes of silicon with silicon wafer bonding and impurity doping, enables the fabrication of on-chip optics with in situ aligned etched grooves for optical fibers, micro-lenses, photodiodes, and laser diodes. Other optical components that can be microfabricated and integrated include semi-transparent beam splitters, micro-optical scanners, pinholes, optical gratings, micro-optical filters, etc. Micromachining of bulk silicon utilizing the parallel etching characteristics thereof can be utilized to develop miniaturization of bio-instrumentation such as wavelength monitoring by fluorescence spectrometers, and other miniaturized optical systems such as Fabry-Perot interferometry for filtering of wavelengths, tunable cavity lasers, micro-holography modules, and wavelength splitters for optical communication systems.

  20. Exploration Technology Development including Surface Acoustic Wave RFID chips

    Data.gov (United States)

    National Aeronautics and Space Administration — This project is focused on maturing future surface exploration technologies and instrumentation and working towards flight instrumentation and systems to support...

  1. Micromachined Parts Advance Medicine, Astrophysics, and More

    Science.gov (United States)

    2015-01-01

    In the mid-1990s, Marshall Space Flight Center awarded two SBIR contracts to Potomac Photonics, now based in Baltimore, for the development of computerized workstations capable of mass-producing tiny, intricate, diffractive optical elements. While the company has since discontinued the workstations, those contracts set the stage for Potomac Photonics to be a leader in the micromachining industry, where NASA remains one of its clients.

  2. FY 1992 Report on the results of the research and development of micromachine technologies. R and D of highly functional maintenance technologies for power generating systems; 1992 nendo micromachine gijutsu no kenkyu kaihatsu seika hokokusho. Hatsuden shisetsuyo kokino maintenance gijutsu kaihatsu

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1993-03-01

    Described herein are the FY 1992 results of the R and D project aimed at development of microcapsules, mother machines, examination modules without retrieval and working modules with retrieval, and their application to total systems for development of the highly functional maintenance technologies for power generating systems. Researches on the microgenerators involve studies and extraction of technical problems for structures, thin-film magnet production methods, coil winding methods, high-speed microbearings and microaccelerators. Researches on the mother machines involve development of the basic elements, on a trial basis, of the electrostatic actuators for the mechanisms of driving the main bodies, and evaluation of their characteristics by a minute torque analyzer. Researches on the examination modules without retrieval involve basic studies on, e.g., expansion driving, supersonic and microwave energy conversion devices for the expansion transfer mechanisms, development of these devices on a trial basis, evaluation of their functions, and extraction of the problems. Researches on the working modules with retrieval involve studies on shape memory alloy materials for tubular manipulators and actuator mechanisms. (NEDO)

  3. Bioinspired Functional Surfaces for Technological Applications

    Science.gov (United States)

    Sharma, Vipul; Kumar, Suneel; Reddy, Kumbam Lingeshwar; Bahuguna, Ashish; Krishnan, Venkata

    2016-08-01

    Biological matters have been in continuous encounter with extreme environmental conditions leading to their evolution over millions of years. The fittest have survived through continuous evolution, an ongoing process. Biological surfaces are the important active interfaces between biological matters and the environment, and have been evolving over time to a higher state of intelligent functionality. Bioinspired surfaces with special functionalities have grabbed attention in materials research in the recent times. The microstructures and mechanisms behind these functional biological surfaces with interesting properties have inspired scientists to create artificial materials and surfaces which possess the properties equivalent to their counterparts. In this review, we have described the interplay between unique multiscale (micro- and nano-scale) structures of biological surfaces with intrinsic material properties which have inspired researchers to achieve the desired wettability and functionalities. Inspired by naturally occurring surfaces, researchers have designed and fabricated novel interfacial materials with versatile functionalities and wettability, such as superantiwetting surfaces (superhydrophobic and superoleophobic), omniphobic, switching wettability and water collecting surfaces. These strategies collectively enable functional surfaces to be utilized in different applications such as fog harvesting, surface-enhanced Raman spectroscopy (SERS), catalysis, sensing and biological applications. This paper delivers a critical review of such inspiring biological surfaces and artificial bioinspired surfaces utilized in different applications, where material science and engineering have merged by taking inspiration from the natural systems.

  4. Micromachined high-performance RF passives in CMOS substrate

    International Nuclear Information System (INIS)

    Li, Xinxin; Ni, Zao; Gu, Lei; Wu, Zhengzheng; Yang, Chen

    2016-01-01

    This review systematically addresses the micromachining technologies used for the fabrication of high-performance radio-frequency (RF) passives that can be integrated into low-cost complementary metal-oxide semiconductor (CMOS)-grade (i.e. low-resistivity) silicon wafers. With the development of various kinds of post-CMOS-compatible microelectromechanical systems (MEMS) processes, 3D structural inductors/transformers, variable capacitors, tunable resonators and band-pass/low-pass filters can be compatibly integrated into active integrated circuits to form monolithic RF system-on-chips. By using MEMS processes, including substrate modifying/suspending and LIGA-like metal electroplating, both the highly lossy substrate effect and the resistive loss can be largely eliminated and depressed, thereby meeting the high-performance requirements of telecommunication applications. (topical review)

  5. Capacitive micromachined ultrasonic transducers for medical imaging and therapy

    International Nuclear Information System (INIS)

    Khuri-Yakub, Butrus T; Oralkan, Ömer

    2011-01-01

    Capacitive micromachined ultrasonic transducers (CMUTs) have been subject to extensive research for the last two decades. Although they were initially developed for air-coupled applications, today their main application space is medical imaging and therapy. This paper first presents a brief description of CMUTs, their basic structure and operating principles. Our progression of developing several generations of fabrication processes is discussed with an emphasis on the advantages and disadvantages of each process. Monolithic and hybrid approaches for integrating CMUTs with supporting integrated circuits are surveyed. Several prototype transducer arrays with integrated front-end electronic circuits we developed and their use for 2D and 3D, anatomical and functional imaging, and ablative therapies are described. The presented results prove the CMUT as a micro-electro-mechanical systems technology for many medical diagnostic and therapeutic applications

  6. Capacitive micromachined ultrasonic transducers for medical imaging and therapy.

    Science.gov (United States)

    Khuri-Yakub, Butrus T; Oralkan, Omer

    2011-05-01

    Capacitive micromachined ultrasonic transducers (CMUTs) have been subject to extensive research for the last two decades. Although they were initially developed for air-coupled applications, today their main application space is medical imaging and therapy. This paper first presents a brief description of CMUTs, their basic structure, and operating principles. Our progression of developing several generations of fabrication processes is discussed with an emphasis on the advantages and disadvantages of each process. Monolithic and hybrid approaches for integrating CMUTs with supporting integrated circuits are surveyed. Several prototype transducer arrays with integrated frontend electronic circuits we developed and their use for 2-D and 3-D, anatomical and functional imaging, and ablative therapies are described. The presented results prove the CMUT as a MEMS technology for many medical diagnostic and therapeutic applications.

  7. Surface contamination technology in decommissioning of nuclear fuel cycle

    International Nuclear Information System (INIS)

    Ishiguro, Hideharu

    2012-01-01

    Surface contamination measurement is the most basic technology in radiation control of the nuclear and radiation facilities. Loose surface contamination causes internal exposure through airborne contamination. Surface contamination measurement is recently more important in the waste management such as confirmation of decontamination factor, contamination survey of carried-out materials from radioactive control area, and application of clearance level. This report describes the base of surface contamination standards, meaning of contamination in decommissioning, relationship between clearance level and surface contamination, and current technology of surface contamination measurement. (author)

  8. The Influence of Coating Structure on Micromachine Stiction

    Energy Technology Data Exchange (ETDEWEB)

    Kushmerick, J.G.; Hankins, M.G.; De Boer, M.P.; Clews, P.J.; Carpick, R.W.; Bunker, B.C.

    2000-10-03

    We have clearly shown that the film morphology dictates the anti-stiction properties of FDTS coatings. Release stiction is not observed when ideal monolayer films are present but can be extensive when thicker aggregate structures are present. This finding is significant because it indicates that agglomerate formation during processing is a major source of irreproducible behavior when FDTS coatings are used to release micromachined parts. The results could also help explain why coatings that are aged at high. humidity start to stick to each other. (AFM results show that humid environments promote the formation of aggregates from monolayer films.) The reason why aggregate structures promote stiction is currently unknown. However, it appears that aggregates interfere with the ability of FDTS to form dense, well-ordered coatings under microstructures, leading to surfaces that are sufficiently hydrophilic to allow for release stiction via an attractive Laplace force during drying.

  9. Solid polymer electrolyte composite membrane comprising laser micromachined porous support

    Science.gov (United States)

    Liu, Han [Waltham, MA; LaConti, Anthony B [Lynnfield, MA; Mittelsteadt, Cortney K [Natick, MA; McCallum, Thomas J [Ashland, MA

    2011-01-11

    A solid polymer electrolyte composite membrane and method of manufacturing the same. According to one embodiment, the composite membrane comprises a rigid, non-electrically-conducting support, the support preferably being a sheet of polyimide having a thickness of about 7.5 to 15 microns. The support has a plurality of cylindrical pores extending perpendicularly between opposing top and bottom surfaces of the support. The pores, which preferably have a diameter of about 5 microns, are made by laser micromachining and preferably are arranged in a defined pattern, for example, with fewer pores located in areas of high membrane stress and more pores located in areas of low membrane stress. The pores are filled with a first solid polymer electrolyte, such as a perfluorosulfonic acid (PFSA) polymer. A second solid polymer electrolyte, which may be the same as or different than the first solid polymer electrolyte, may be deposited over the top and/or bottom of the first solid polymer electrolyte.

  10. Resonant gravimetric immunosensing based on capacitive micromachined ultrasound transducers

    KAUST Repository

    Viržonis, Darius

    2014-04-08

    High-frequency (40 MHz) and low-frequency (7 MHz) capacitive micromachined ultrasound transducers (CMUT) were fabricated and tested for use in gravimetric detection of biomolecules. The low-frequency CMUT sensors have a gold-coated surface, while the high-frequency sensors have a silicon nitride surface. Both surfaces were functionalized with bovine leukemia virus antigen gp51 acting as the antigen. On addition of an a specific antibody labeled with horseradish peroxidase (HRP), the antigen/antibody complex is formed on the surface and quantified by HRP-catalyzed oxidation of tetramethylbenzidine. It has been found that a considerably smaller quantity of immuno complex is formed on the high frequency sensor surface. In parallel, the loading of the surface of the CMUT was determined via resonance frequency and electromechanical resistance readings. Following the formation of the immuno complexes, the resonance frequencies of the low-frequency and high-frequency sensors decrease by up to 420 and 440 kHz, respectively. Finite element analysis reveals that the loading of the (gold-coated) low frequency sensors is several times larger than that on high frequency sensors. The formation of the protein film with pronounced elasticity and stress on the gold surface case is discussed. We also discuss the adoption of this method for the detection of DNA using a hybridization assay following polymerase chain reaction.

  11. Design and Performance of a Focus-Detection System for Use in Laser Micromachining

    Directory of Open Access Journals (Sweden)

    Binh Xuan Cao

    2016-01-01

    Full Text Available We describe a new approach for locating the focal position in laser micromachining. This approach is based on a feedback system that uses a charge-coupled device (CCD camera, a beam splitter, and a mirror to focus a laser beam on the surface of a work piece. We tested the proposed method for locating the focal position by using Zemax simulations, as well as physically carrying out drilling processes. Compared with conventional methods, this approach is advantageous because: the implementation is simple, the specimen can easily be positioned at the focal position, and the dynamically adjustable scan amplitude and the CCD camera can be used to monitor the laser beam’s profile. The proposed technique will be particularly useful for locating the focal position on any surface in laser micromachining.

  12. Modelling of micromachining of human tooth enamel by erbium laser radiation

    Energy Technology Data Exchange (ETDEWEB)

    Belikov, A V; Skrypnik, A V; Shatilova, K V [St. Petersburg National Research University of Information Technologies, Mechanics and Optics, St. Petersburg (Russian Federation)

    2014-08-31

    We consider a 3D cellular model of human tooth enamel and a photomechanical cellular model of enamel ablation by erbium laser radiation, taking into account the structural peculiarities of enamel, energy distribution in the laser beam cross section and attenuation of laser energy in biological tissue. The surface area of the texture in enamel is calculated after its micromachining by erbium laser radiation. The influence of the surface area on the bond strength of enamel with dental filling materials is discussed. A good correlation between the computer simulation of the total work of adhesion and experimentally measured bond strength between the dental filling material and the tooth enamel after its micromachining by means of YAG : Er laser radiation is attained. (laser biophotonics)

  13. Modelling of micromachining of human tooth enamel by erbium laser radiation

    International Nuclear Information System (INIS)

    Belikov, A V; Skrypnik, A V; Shatilova, K V

    2014-01-01

    We consider a 3D cellular model of human tooth enamel and a photomechanical cellular model of enamel ablation by erbium laser radiation, taking into account the structural peculiarities of enamel, energy distribution in the laser beam cross section and attenuation of laser energy in biological tissue. The surface area of the texture in enamel is calculated after its micromachining by erbium laser radiation. The influence of the surface area on the bond strength of enamel with dental filling materials is discussed. A good correlation between the computer simulation of the total work of adhesion and experimentally measured bond strength between the dental filling material and the tooth enamel after its micromachining by means of YAG : Er laser radiation is attained. (laser biophotonics)

  14. Plasma technology of the surface polymer activation

    International Nuclear Information System (INIS)

    Dutra, Jorge C.N.; Mello, Sandra C.; Massi, Marcos; Otani, Choyu; Maciel, Homero S.; Bittencourt, Edison

    2005-01-01

    A number of polymers, especially rubbers, require surface treatment to achieve a satisfactory level of adhesion. The surface of EPDM rubber vulcanized is high hydrophobicity and is not suited for a number of potential applications, in particular, for adhering to the polyurethane liner of solid rocket propellants. In this case, plasma treatment can be a very attractive process because it can efficiently increase the surface energy attributed to surface oxidation with the introduction of polar groups 1, 2. In order to investigate the influence of the parameters on the modifications of the treated surface samples of EPDM rubber by plasma generated by gas oxygen and argon, the water and methylene iodide contact angles were measured at room temperature with an image analyzing using the sessile drop technique 3 - 6 . (author)

  15. A review on technologies for oil shale surface retort

    International Nuclear Information System (INIS)

    Pan, Y.; Zhang, X.; Liu, S.; Yang, S.A.; Ren, N.

    2012-01-01

    In recent years, with the shortage of oil resources and the continuous increase in oil prices, oil shale has seized much more attention. Oil shale is a kind of important unconventional oil and gas resources. Oil shale resources are plentiful according to the proven reserves in places. And shale oil is far richer than crude oil in the world. Technology processing can be divided into two categories: surface retorting and in-situ technology. The process and equipment of surface retorting are more mature, and are still up to now, the main way to produce shale oil from oil shale. According to the variations of the particle size, the surface retorting technologies of oil shale can be notified and classified into two categories such as lump shale process and particulate shale process. The lump shale processes introduced in this article include the Fushun retorting technology, the Kiviter technology and the Petrosix technology; the particulate processes include the Gloter technology, the LR technology, the Tosco-II technology, the ATP (Alberta Taciuk Process) technology and the Enefit-280 technology. After the thorough comparison of these technologies, we can notice that, this article aim is to show off that : the particulate process that is environmentally friendly, with its low cost and high economic returns characteristics, will be the major development trend; Combined technologies of surface retorting technology and other oil producing technology should be developed; the comprehensive utilization of oil shale should be considered during the development of surface retorting technology, meanwhile the process should be harmless to the environment. (author)

  16. Role of surface studies in science and technology

    Energy Technology Data Exchange (ETDEWEB)

    Karkhanavala, M D [Bhabha Atomic Research Centre, Bombay (India). Chemistry Div.

    1977-01-01

    Reactivity of solids is influenced by the surface properties such as structure, dislocations and composition. Corrosion and erosion are essentially surface phenomena. Surface studies, therefore, assume importance in prevention and minimization of corrosion and erosion. Discussion is illustrated with examples drawn from the field of nuclear power reactor technology.

  17. Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration

    Science.gov (United States)

    Laconte, Jean; Flandre, D.; Raskin, Jean-Pierre

    Co-integration of sensors with their associated electronics on a single silicon chip may provide many significant benefits regarding performance, reliability, miniaturization and process simplicity without significantly increasing the total cost. Micromachined Thin-Film Sensors for SOI-CMOS Co-integration covers the challenges and interests and demonstrates the successful co-integration of gas flow sensors on dielectric membrane, with their associated electronics, in CMOS-SOI technology. We firstly investigate the extraction of residual stress in thin layers and in their stacking and the release, in post-processing, of a 1 μm-thick robust and flat dielectric multilayered membrane using Tetramethyl Ammonium Hydroxide (TMAH) silicon micromachining solution.

  18. Advances in surface treatments: Technology, applications, effects

    International Nuclear Information System (INIS)

    Niku-Lari, A.

    1987-01-01

    An international handbook has been produced to include all aspects of residual stresses, including the theoretical background, effects of residual stresses, measurement and calculation and quantitative assessment of residual stress effects. Techniques for altering residual stresses, particularly surface treatments, are discussed. Up to date information on the state of the art is presented. (UK)

  19. Implementing Cleaner Printed Wiring Board Technologies: Surface Finishes

    Science.gov (United States)

    This document describes the problems, solutions, and time and effort involved in implementing alternative surface finish technologies, and this guide is produced as part of the DfE Printed Wiring Board Project

  20. Surface analytical methods in nuclear technology

    International Nuclear Information System (INIS)

    Baumgaertner, F.

    1985-06-01

    Application of SEM-EDX, AES, XPS are exemplarily demonstrated for highly radioactive materials with ionizing dose rates of about 1 Sv near the surface. The samples studied are aerosols from the high level waste vitrification process, postprecipitation in a pretreated fuel solution and emulsifying sludge from a solvent extraction process. The results of the chemical composition differentiated down to microscopic level reveal much more information about the history of a sample than those available from the integral macro-methods analysing. Elucidication of chemical composition and body structure in micrometer level may give insight into the origin and generation processes of samples under investigation. (orig.)

  1. A Three-Dimensional Enormous Surface Area Aluminum Microneedle Array with Nanoporous Structure

    OpenAIRE

    Chen, Po Chun; Hsieh, Sheng Jen; Chen, Chien Chon; Zou, Jun

    2013-01-01

    We proposed fabricating an aluminum microneedle array with a nanochannel structure on the surface by combining micromachining, electrolyte polishing, and anodization methods. The microneedle array provides a three-dimensional (3D) structure that possesses several hundred times more surface area than a traditional nanochannel template. Therefore, the microneedle array can potentially be used in many technology applications. This 3D microneedle array device can not only be used for painless inj...

  2. Studying the mechanism of micromachining by short pulsed laser

    Science.gov (United States)

    Gadag, Shiva

    The semiconductor materials like Si and the transparent dielectric materials like glass and quartz are extensively used in optoelectronics, microelectronics, and microelectromechanical systems (MEMS) industries. The combination of these materials often go hand in hand for applications in MEMS such as in chips for pressure sensors, charge coupled devices (CCD), and photovoltaic (PV) cells for solar energy generation. The transparent negative terminal of the solar cell is made of glass on one surface of the PV cell. The positive terminal (cathode) on the other surface of the solar cell is made of silicon with a glass negative terminal (anode). The digital watches and cell phones, LEDs, micro-lens, optical components, and laser optics are other examples for the application of silicon and or glass. The Si and quartz are materials extensively used in CCD and LED for digital cameras and CD players respectively. Hence, three materials: (1) a semiconductor silicon and transparent dielectrics,- (2) glass, and (3) quartz are chosen for laser micromachining as they have wide spread applications in microelectronics industry. The Q-switched, nanosecond pulsed lasers are most extensively used for micro-machining. The nanosecond type of short pulsed laser is less expensive for the end users than the second type, pico or femto, ultra-short pulsed lasers. The majority of the research work done on these materials (Si, SiO 2, and glass) is based on the ultra-short pulsed lasers. This is because of the cut quality, pin point precision of the drilled holes, formation of the nanometer size microstructures and fine features, and minimally invasive heat affected zone. However, there are many applications such as large surface area dicing, cutting, surface cleaning of Si wafers by ablation, and drilling of relatively large-sized holes where some associated heat affected zone due to melting can be tolerated. In such applications the nanosecond pulsed laser ablation of materials is very

  3. Experimental and Modeling Study of Liquid-Assisted—Laser Beam Micromachining of Smart Ceramic Materials

    Directory of Open Access Journals (Sweden)

    Mayur Parmar

    2018-05-01

    Full Text Available Smart ceramic materials are next generation materials with the inherent intelligence to adapt to change in the external environment. These materials are destined to play an essential role in several critical engineering applications. Machining these materials using traditional machining processes is a challenge. The laser beam micromachining (LBMM process has the potential to machine such smart materials. However, laser machining when performed in air induces high thermal stress on the surface, often leading to crack formation, recast and re-deposition of ablated material, and large heat-affected zones (HAZ. Performing laser beam machining in the presence of a liquid medium could potentially resolve these issues. This research investigates the possibility of using a Liquid Assisted—Laser Beam Micromachining (LA-LBMM process for micromachining smart ceramic materials. Experimental studies are performed to compare the machining quality of laser beam machining process in air and in a liquid medium. The study reveals that the presence of liquid medium helps in controlling the heat-affected zone and the taper angle of the cavity drilled, thereby enhancing the machining quality. Analytical modeling is developed for the prediction of HAZ and cavity diameter both in air and underwater conditions, and the model is capable of predicting the experimental results to within 10% error.

  4. A Novel Silicon Micromachined Integrated MCM Thermal Management System

    Science.gov (United States)

    Kazmierczak, M. J.; Henderson, H. T.; Gerner, F. M.

    1997-01-01

    "Micromachining" is a chemical means of etching three-dimensional structures, typically in single- crystalline silicon. These techniques are leading toward what is coming to be referred to as MEMS (Micro Electro Mechanical Systems), where in addition to the ordinary two-dimensional (planar) microelectronics, it is possible to build three-dimensional n-ticromotors, electrically- actuated raicrovalves, hydraulic systems and much more on the same microchip. These techniques become possible because of differential etching rates of various crystallographic planes and materials used for semiconductor n-ticrofabfication. The University of Cincinnati group in collaboration with Karl Baker at NASA Lewis were the first to form micro heat pipes in silicon by the above techniques. Current work now in progress using MEMS technology is now directed towards the development of the next generation in MCM (Multi Chip Module) packaging. Here we propose to develop a complete electronic thermal management system which will allow densifica6on in chip stacking by perhaps two orders of magnitude. Furthermore the proposed technique will allow ordinary conu-nercial integrated chips to be utilized. Basically, the new technique involves etching square holes into a silicon substrate and then inserting and bonding commercially available integrated chips into these holes. For example, over a 100 1/4 in. by 1 /4 in. integrated chips can be placed on a 4 in. by 4 in. silicon substrate to form a Multi-Chip Module (MCM). Placing these MCM's in-line within an integrated rack then allows for three-diniensional stacking. Increased miniaturization of microelectronic circuits will lead to very high local heat fluxes. A high performance thermal management system will be specifically designed to remove the generated energy. More specifically, a compact heat exchanger with milli / microchannels will be developed and tested to remove the heat through the back side of this MCM assembly for moderate and high

  5. Micromachined two dimensional resistor arrays for determination of gas parameters

    NARCIS (Netherlands)

    van Baar, J.J.J.; Verwey, Willem B.; Dijkstra, Mindert; Dijkstra, Marcel; Wiegerink, Remco J.; Lammerink, Theodorus S.J.; Krijnen, Gijsbertus J.M.; Elwenspoek, Michael Curt

    A resistive sensor array is presented for two dimensional temperature distribution measurements in a micromachined flow channel. This allows simultaneous measurement of flow velocity and fluid parameters, like thermal conductivity, diffusion coefficient and viscosity. More general advantages of

  6. Integration of Capacitive Micromachined Ultrasound Transducers to Microfluidic Devices

    KAUST Repository

    Viržonis, Darius; Kodzius, Rimantas; Vanagas, Galius

    2013-01-01

    The design and manufacturing flexibility of capacitive micromachined ultrasound transducers (CMUT) makes them attractive option for integration with microfluidic devices both for sensing and fluid manipulation. CMUT concept is introduced here

  7. Integration of Capacitive Micromachined Ultrasound Transducers to Microfluidic Devices

    KAUST Repository

    Viržonis, Darius

    2013-10-22

    The design and manufacturing flexibility of capacitive micromachined ultrasound transducers (CMUT) makes them attractive option for integration with microfluidic devices both for sensing and fluid manipulation. CMUT concept is introduced here by presentin

  8. Non-traditional micromachining processes fundamentals and applications

    CERN Document Server

    Bhattacharyya, B; Davim, J

    2017-01-01

    This book presents a complete coverage of micromachining processes from their basic material removal phenomena to past and recent research carried by a number of researchers worldwide. Chapters on effective utilization of material resources, improved efficiency, reliability, durability, and cost effectiveness of the products are presented. This book provides the reader with new and recent developments in the field of micromachining and microfabrication of engineering materials.

  9. Development of a Novel Transparent Flexible Capacitive Micromachined Ultrasonic Transducer

    Directory of Open Access Journals (Sweden)

    Da-Chen Pang

    2017-06-01

    Full Text Available This paper presents the world’s first transparent flexible capacitive micromachined ultrasonic transducer (CMUT that was fabricated through a roll-lamination technique. This polymer-based CMUT has advantages of transparency, flexibility, and non-contacting detection which provide unique functions in display panel applications. Comprising an indium tin oxide-polyethylene terephthalate (ITO-PET substrate, SU-8 sidewall and vibrating membranes, and silver nanowire transparent electrode, the transducer has visible-light transmittance exceeding 80% and can operate on curved surfaces with a 40 mm radius of curvature. Unlike the traditional silicon-based high temperature process, the CMUT can be fabricated on a flexible substrate at a temperature below 100 °C to reduce residual stress introduced at high temperature. The CMUT on the curved surfaces can detect a flat target and finger at distances up to 50 mm and 40 mm, respectively. The transparent flexible CMUT provides a better human-machine interface than existing touch panels because it can be integrated with a display panel for non-contacting control in a health conscious environment and the flexible feature is critical for curved display and wearable electronics.

  10. Reactor surface contamination stabilization. Innovative technology summary report

    International Nuclear Information System (INIS)

    1998-11-01

    Contaminated surfaces, such as the face of a nuclear reactor, need to be stabilized (fixed) to avoid airborne contamination during decontamination and decommissioning activities, and to prepare for interim safe storage. The traditional (baseline) method of fixing the contamination has been to spray a coating on the surfaces, but ensuring complete coverage over complex shapes, such as nozzles and hoses, is difficult. The Hanford Site C Reactor Technology Demonstration Group demonstrated innovative technologies to assess stabilization properties of various coatings and to achieve complete coverage of complex surfaces on the reactor face. This demonstration was conducted in two phases: the first phase consisted of a series of laboratory assessments of various stabilization coatings on metal coupons. For the second phase, coatings that passed the laboratory tests were applied to the front face of the C Reactor and evaluated. The baseline coating (Rust-Oleum No. 769) and one of the innovative technologies did not completely cover nozzle assemblies on the reactor face, the most critical of the second-phase evaluation criteria. However, one of the innovative coating systems, consisting of a base layer of foam covered by an outer layer of a polymeric film, was successful. The baseline technology would cost approximately 33% as much as the innovative technology cost of $64,000 to stabilize an entire reactor face (196 m 2 or 2116 ft 2 ) with 2,004 nozzle assemblies, but the baseline system failed to provide complete surface coverage

  11. Micromachined fiber optic Fabry-Perot underwater acoustic probe

    Science.gov (United States)

    Wang, Fuyin; Shao, Zhengzheng; Hu, Zhengliang; Luo, Hong; Xie, Jiehui; Hu, Yongming

    2014-08-01

    One of the most important branches in the development trend of the traditional fiber optic physical sensor is the miniaturization of sensor structure. Miniature fiber optic sensor can realize point measurement, and then to develop sensor networks to achieve quasi-distributed or distributed sensing as well as line measurement to area monitoring, which will greatly extend the application area of fiber optic sensors. The development of MEMS technology brings a light path to address the problems brought by the procedure of sensor miniaturization. Sensors manufactured by MEMS technology possess the advantages of small volume, light weight, easy fabricated and low cost. In this paper, a fiber optic extrinsic Fabry-Perot interferometric underwater acoustic probe utilizing micromachined diaphragm collaborated with fiber optic technology and MEMS technology has been designed and implemented to actualize underwater acoustic sensing. Diaphragm with central embossment, where the embossment is used to anti-hydrostatic pressure which would largely deflect the diaphragm that induce interferometric fringe fading, has been made by double-sided etching of silicon on insulator. By bonding the acoustic-sensitive diaphragm as well as a cleaved fiber end in ferrule with an outer sleeve, an extrinsic Fabry-Perot interferometer has been constructed. The sensor has been interrogated by quadrature-point control method and tested in field-stable acoustic standing wave tube. Results have been shown that the recovered signal detected by the sensor coincided well with the corresponding transmitted signal and the sensitivity response was flat in frequency range from 10 Hz to 2kHz with the value about -154.6 dB re. 1/μPa. It has been manifest that the designed sensor could be used as an underwater acoustic probe.

  12. A Lunar Surface System Supportability Technology Development Roadmap

    Science.gov (United States)

    Oeftering, Richard C.; Struk, Peter M.; Taleghani, barmac K.

    2011-01-01

    This paper discusses the establishment of a Supportability Technology Development Roadmap as a guide for developing capabilities intended to allow NASA s Constellation program to enable a supportable, sustainable and affordable exploration of the Moon and Mars. Presented is a discussion of supportability, in terms of space facility maintenance, repair and related logistics and a comparison of how lunar outpost supportability differs from the International Space Station. Supportability lessons learned from NASA and Department of Defense experience and their impact on a future lunar outpost is discussed. A supportability concept for future missions to the Moon and Mars that involves a transition from a highly logistics dependent to a logistically independent operation is discussed. Lunar outpost supportability capability needs are summarized and a supportability technology development strategy is established. The resulting Lunar Surface Systems Supportability Strategy defines general criteria that will be used to select technologies that will enable future flight crews to act effectively to respond to problems and exploit opportunities in an environment of extreme resource scarcity and isolation. This strategy also introduces the concept of exploiting flight hardware as a supportability resource. The technology roadmap involves development of three mutually supporting technology categories, Diagnostics Test and Verification, Maintenance and Repair, and Scavenging and Recycling. The technology roadmap establishes two distinct technology types, "Embedded" and "Process" technologies, with different implementation and thus different criteria and development approaches. The supportability technology roadmap addresses the technology readiness level, and estimated development schedule for technology groups that includes down-selection decision gates that correlate with the lunar program milestones. The resulting supportability technology roadmap is intended to develop a set

  13. Surface chemistry: Key to control and advance myriad technologies

    Science.gov (United States)

    Yates, John T.; Campbell, Charles T.

    2011-01-01

    This special issue on surface chemistry is introduced with a brief history of the field, a summary of the importance of surface chemistry in technological applications, a brief overview of some of the most important recent developments in this field, and a look forward to some of its most exciting future directions. This collection of invited articles is intended to provide a snapshot of current developments in the field, exemplify the state of the art in fundamental research in surface chemistry, and highlight some possibilities in the future. Here, we show how those articles fit together in the bigger picture of this field. PMID:21245359

  14. Coal surface control for advanced physical fine coal cleaning technologies

    Energy Technology Data Exchange (ETDEWEB)

    Morsi, B.I.; Chiang, S.H.; Sharkey, A.; Blachere, J.; Klinzing, G.; Araujo, G.; Cheng, Y.S.; Gray, R.; Streeter, R.; Bi, H.; Campbell, P.; Chiarlli, P.; Ciocco, M.; Hittle, L.; Kim, S.; Kim, Y.; Perez, L.; Venkatadri, R.

    1992-01-01

    This final report presents the research work carried out on the Coal Surface Control for Advanced Physical Fine Coal Cleaning Technologies project, sponsored by the US Department of Energy, Pittsburgh Energy Technology Center (DOE/PETC). The project was to support the engineering development of the selective agglomeration technology in order to reduce the sulfur content of US coals for controlling SO[sub 2] emissions (i.e., acid rain precursors). The overall effort was a part of the DOE/PETCs Acid Rain Control Initiative (ARCI). The overall objective of the project is to develop techniques for coal surface control prior to the advanced physical fine coal cleaning process of selective agglomeration in order to achieve 85% pyrite sulfur rejection at an energy recovery greater than 85% based on run-of-mine coal. The surface control is meant to encompass surface modification during grinding and laboratory beneficiation testing. The project includes the following tasks: Project planning; methods for analysis of samples; development of standard beneficiation test; grinding studies; modification of particle surface; and exploratory R D and support. The coal samples used in this project include three base coals, Upper Freeport - Indiana County, PA, Pittsburgh NO. 8 - Belmont County, OH, and Illinois No. 6 - Randolph County, IL, and three additional coals, Upper Freeport - Grant County- WV, Kentucky No. 9 Hopkins County, KY, and Wyodak - Campbell County, WY. A total of 149 drums of coal were received.

  15. Surface passivation technology for III-V semiconductor nanoelectronics

    International Nuclear Information System (INIS)

    Hasegawa, Hideki; Akazawa, Masamichi

    2008-01-01

    The present status and key issues of surface passivation technology for III-V surfaces are discussed in view of applications to emerging novel III-V nanoelectronics. First, necessities of passivation and currently available surface passivation technologies for GaAs, InGaAs and AlGaAs are reviewed. Then, the principle of the Si interface control layer (ICL)-based passivation scheme by the authors' group is introduced and its basic characterization is presented. Ths Si ICL is a molecular beam epitaxy (MBE)-grown ultrathin Si layer inserted between III-V semiconductor and passivation dielectric. Finally, applications of the Si ICL method to passivation of GaAs nanowires and GaAs nanowire transistors and to realization of pinning-free high-k dielectric/GaAs MOS gate stacks are presented

  16. Studies of cell biomechanics with surface micro-/nano-technology

    International Nuclear Information System (INIS)

    Wang Dong; Zhang Wei; Jiang Xingyu

    2011-01-01

    We report the recent progress in our studies of cell biology using micro-/nano-technology. Cells have a size of several to tens of microns, which makes them easily manipulated by micro-/nano-technology. The shape of the cell influences the alignment of the actin cytoskeleton, which bears the main forces of the cell, maintains the shape,and mediates a series of biochemical reactions. We invented a stretching device and studied the real-time actin filament dynamics under stretch. We found that one stretch cycle shortened the actin filaments and promoted their reassemble process. Cell migration is a complex mechanical process. We found that cell geometry determines the cell polarity and migration direction. We fabricated three-dimensional surfaces to mimic the topography in vivo, and further built a cell culture model by integrating the three-dimensional surface, microfluidics, cell patterning,and coculturing of multiple cell types. We also investigated the neuronal guidance by surface patterning. (authors)

  17. Silicon Micromachining in RF and Photonic Applications

    Science.gov (United States)

    Lin, Tsen-Hwang; Congdon, Phil; Magel, Gregory; Pang, Lily; Goldsmith, Chuck; Randall, John; Ho, Nguyen

    1995-01-01

    Texas Instruments (TI) has developed membrane and micromirror devices since the late 1970s. An eggcrate space membrane was used as the spatial light modulator in the early years. Discrete micromirrors supported by cantilever beams created a new era for micromirror devices. Torsional micromirror and flexure-beam micromirror devices were promising for mass production because of their stable supports. TI's digital torsional micromirror device is an amplitude modulator (known as the digital micromirror device (DMD) and is in production development, discussed elsewhere. We also use a torsional device for a 4 x 4 fiber-optic crossbar switch in a 2 cm x 2 cm package. The flexure-beam micromirror device is an analog phase modulator and is considered more efficient than amplitude modulators for use in optical processing systems. TI also developed millimeter-sized membranes for integrated optical switches for telecommunication and network applications. Using a member in radio frequency (RF) switch applications is a rapidly growing area because of the micromechanical device performance in microsecond-switching characteristics. Our preliminary membrane RF switch test structure results indicate promising speed and RF switching performance. TI collaborated with MIT for modeling of metal-based micromachining.

  18. Surface etching technologies for monocrystalline silicon wafer solar cells

    Science.gov (United States)

    Tang, Muzhi

    With more than 200 GW of accumulated installations in 2015, photovoltaics (PV) has become an important green energy harvesting method. The PV market is dominated by solar cells made from crystalline silicon wafers. The engineering of the wafer surfaces is critical to the solar cell cost reduction and performance enhancement. Therefore, this thesis focuses on the development of surface etching technologies for monocrystalline silicon wafer solar cells. It aims to develop a more efficient alkaline texturing method and more effective surface cleaning processes. Firstly, a rapid, isopropanol alcohol free texturing method is successfully demonstrated to shorten the process time and reduce the consumption of chemicals. This method utilizes the special chemical properties of triethylamine, which can form Si-N bonds with wafer surface atoms. Secondly, a room-temperature anisotropic emitter etch-back process is developed to improve the n+ emitter passivation. Using this method, 19.0% efficient screen-printed aluminium back surface field solar cells are developed that show an efficiency gain of 0.15% (absolute) compared with conventionally made solar cells. Finally, state-of-the-art silicon surface passivation results are achieved using hydrogen plasma etching as a dry alternative to the classical hydrofluoric acid wet-chemical process. The effective native oxide removal and the hydrogenation of the silicon surface are shown to be the reasons for the excellent level of surface passivation achieved with this novel method.

  19. Development of exosome surface display technology in living human cells

    Energy Technology Data Exchange (ETDEWEB)

    Stickney, Zachary, E-mail: zstickney@scu.edu; Losacco, Joseph, E-mail: jlosacco@scu.edu; McDevitt, Sophie, E-mail: smmcdevitt@scu.edu; Zhang, Zhiwen, E-mail: zzhang@scu.edu; Lu, Biao, E-mail: blu2@scu.edu

    2016-03-25

    Surface display technology is an emerging key player in presenting functional proteins for targeted drug delivery and therapy. Although a number of technologies exist, a desirable mammalian surface display system is lacking. Exosomes are extracellular vesicles that facilitate cell–cell communication and can be engineered as nano-shuttles for cell-specific delivery. In this study, we report the development of a novel exosome surface display technology by exploiting mammalian cell secreted nano-vesicles and their trans-membrane protein tetraspanins. By constructing a set of fluorescent reporters for both the inner and outer surface display on exosomes at two selected sites of tetraspanins, we demonstrated the successful exosomal display via gene transfection and monitoring fluorescence in vivo. We subsequently validated our system by demonstrating the expected intracellular partitioning of reporter protein into sub-cellular compartments and secretion of exosomes from human HEK293 cells. Lastly, we established the stable engineered cells to harness the ability of this robust system for continuous production, secretion, and uptake of displayed exosomes with minimal impact on human cell biology. In sum, our work paved the way for potential applications of exosome, including exosome tracking and imaging, targeted drug delivery, as well as exosome-mediated vaccine and therapy.

  20. Development of exosome surface display technology in living human cells

    International Nuclear Information System (INIS)

    Stickney, Zachary; Losacco, Joseph; McDevitt, Sophie; Zhang, Zhiwen; Lu, Biao

    2016-01-01

    Surface display technology is an emerging key player in presenting functional proteins for targeted drug delivery and therapy. Although a number of technologies exist, a desirable mammalian surface display system is lacking. Exosomes are extracellular vesicles that facilitate cell–cell communication and can be engineered as nano-shuttles for cell-specific delivery. In this study, we report the development of a novel exosome surface display technology by exploiting mammalian cell secreted nano-vesicles and their trans-membrane protein tetraspanins. By constructing a set of fluorescent reporters for both the inner and outer surface display on exosomes at two selected sites of tetraspanins, we demonstrated the successful exosomal display via gene transfection and monitoring fluorescence in vivo. We subsequently validated our system by demonstrating the expected intracellular partitioning of reporter protein into sub-cellular compartments and secretion of exosomes from human HEK293 cells. Lastly, we established the stable engineered cells to harness the ability of this robust system for continuous production, secretion, and uptake of displayed exosomes with minimal impact on human cell biology. In sum, our work paved the way for potential applications of exosome, including exosome tracking and imaging, targeted drug delivery, as well as exosome-mediated vaccine and therapy.

  1. Technology and economics of near-surface geothermal resources exploitation

    Directory of Open Access Journals (Sweden)

    Э. И. Богуславский

    2017-04-01

    Full Text Available The paper presents economic justification for applicability of near-surface geothermal installations in Luga region, based on results of techno-economic calculations as well as integrated technical and economic comparison of different prediction scenarios of heat supply, both conventional and using geothermal heat pumps (GHP. Construction costs of a near-surface geothermal system can exceed the costs of central heating by 50-100 %. However, operation and maintenance (O&M costs of heat production for geothermal systems are 50-70 % lower than for conventional sources of heating. Currently this technology is very important, it is applied in various countries (USA, Germany, Japan, China etc., and depending on the region both near-surface and deep boreholes are being used. World practice of near-surface geothermal systems application is reviewed in the paper.

  2. Plasma assisted surface coating/modification processes: An emerging technology

    Science.gov (United States)

    Spalvins, T.

    1986-01-01

    A broad understanding of the numerous ion or plasma assisted surface coating/modification processes is sought. An awareness of the principles of these processes is needed before discussing in detail the ion nitriding technology. On the basis of surface modifications arising from ion or plasma energizing and interactions, it can be broadly classified as deposition of distinct overlay coatings (sputtering-dc, radio frequency, magnetron, reactive; ion plating-diode, triode) and surface property modification without forming a discrete coating (ion implantation, ion beam mixing, laser beam irradiation, ion nitriding, ion carburizing, plasma oxidation). These techniques offer a great flexibility and are capable in tailoring desirable chemical and structural surface properties independent of the bulk properties.

  3. Plasma assisted surface coating/modification processes - An emerging technology

    Science.gov (United States)

    Spalvins, T.

    1987-01-01

    A broad understanding of the numerous ion or plasma assisted surface coating/modification processes is sought. An awareness of the principles of these processes is needed before discussing in detail the ion nitriding technology. On the basis of surface modifications arising from ion or plasma energizing and interactions, it can be broadly classified as deposition of distinct overlay coatings (sputtering-dc, radio frequency, magnetron, reactive; ion plating-diode, triode) and surface property modification without forming a discrete coating (ion implantation, ion beam mixing, laser beam irradiation, ion nitriding, ion carburizing, plasma oxidation. These techniques offer a great flexibility and are capable in tailoring desirable chemical and structural surface properties independent of the bulk properties.

  4. Smooth Surfaces: A review of current and planned smooth surface technologies for fouling resistance in boiler

    Energy Technology Data Exchange (ETDEWEB)

    Corkery, Robert; Baefver, Linda; Davidsson, Kent; Feiler, Adam

    2012-02-15

    Here we have described the basics of boilers, fuels, combustion, flue gas composition and mechanisms of deposition. We have reviewed coating technologies for boiler tubes, including their materials compositions, nano structures and performances. The surface forces in boilers, in particular those relevant to formation of unwanted deposits in boilers have also been reviewed, and some comparative calculations have been included to indicate the procedures needed for further study. Finally practical recommendations on the important considerations in minimizing deposition on boiler surfaces are made

  5. A batch process micromachined thermoelectric energy harvester: fabrication and characterization

    International Nuclear Information System (INIS)

    Su, J; Goedbloed, M; Van Andel, Y; De Nooijer, M C; Elfrink, R; Wang, Z; Vullers, R J M; Leonov, V

    2010-01-01

    Micromachined thermopiles are considered as a cost-effective solution for energy harvesters working at a small temperature difference and weak heat flows typical for, e.g., the human body. They can be used for powering autonomous wireless sensor nodes in a body area network. In this paper, a micromachined thermoelectric energy harvester with 6 µm high polycrystalline silicon germanium (poly-SiGe) thermocouples fabricated on a 6 inch wafer is presented. An open circuit voltage of 1.49 V and an output power of 0.4 µW can be generated with 3.5 K temperature difference in a model of a wearable micromachined energy harvester of the discussed design, which has a die size of 1.0 mm × 2.5 mm inside a watch-size generator

  6. Comparison of the effectiveness of different antimicrobial surface technologies

    Directory of Open Access Journals (Sweden)

    Buhl Sebastian

    2017-09-01

    Full Text Available The risk of infection via microbiologically contaminated surfaces has already been demonstrated by other publications. In this work two different antibacterial surface technologies transition metalloacids (AMiSTec and TiO2/AgNO3 (Health Complete were compared regarding feasibility as well as their advantages and disadvantages. The examination of the antimicrobial activity was assessed according to the JIS Z 2801. We could demonstrate that all of our tested samples showed a strong antimicrobial activity (>log 3 germ reduction in the JIS experiments. Furthermore this strong antibacterial effect could be shown already after <30min incubation and at low light intensity (approx. 300 Lux for the TiO2/AgNO3 samples. Both technologies provide a high potential for an improved infection control for example in a high risk environment like operation rooms or intensive care units.

  7. International Symposium on Interfacial Joining and Surface Technology (IJST2013)

    Science.gov (United States)

    Takahashi, Yasuo

    2014-08-01

    Interfacial joining (bonding) is a widely accepted welding process and one of the environmentally benign technologies used in industrial production. As the bonding temperature is lower than the melting point of the parent materials, melting of the latter is kept to a minimum. The process can be based on diffusion bonding, pressure welding, friction welding, ultrasonic bonding, or brazing-soldering, all of which offer many advantages over fusion welding. In addition, surface technologies such as surface modification, spraying, coating, plating, and thin-film formation are necessary for advanced manufacturing, fabrication, and electronics packaging. Together, interfacial joining and surface technology (IJST) will continue to be used in various industrial fields because IJST is a very significant form of environmentally conscious materials processing. The international symposium of IJST 2013 was held at Icho Kaikan, Osaka University, Japan from 27-29 November, 2013. A total of 138 participants came from around the world to attend 56 oral presentations and 36 posters presented at the symposium, and to discuss the latest research and developments on interfacial joining and surface technologies. This symposium was also held to commemorate the 30th anniversary of the Technical Commission on Interfacial Joining of the Japan Welding Society. On behalf of the chair of the symposium, it is my great pleasure to present this volume of IOP Conference Series: Materials Science and Engineering (MSE). Among the presentations, 43 papers are published here, and I believe all of the papers have provided the welding community with much useful information. I would like to thank the authors for their enthusiastic and excellent contributions. Finally, I would like to thank all members of the committees, secretariats, participants, and everyone who contributed to this symposium through their support and invaluable effort for the success of IJST 2013. Yasuo Takahashi Chair of IJST 2013

  8. International Symposium on Interfacial Joining and Surface Technology (IJST2013)

    International Nuclear Information System (INIS)

    Takahashi, Yasuo

    2014-01-01

    Interfacial joining (bonding) is a widely accepted welding process and one of the environmentally benign technologies used in industrial production. As the bonding temperature is lower than the melting point of the parent materials, melting of the latter is kept to a minimum. The process can be based on diffusion bonding, pressure welding, friction welding, ultrasonic bonding, or brazing-soldering, all of which offer many advantages over fusion welding. In addition, surface technologies such as surface modification, spraying, coating, plating, and thin-film formation are necessary for advanced manufacturing, fabrication, and electronics packaging. Together, interfacial joining and surface technology (IJST) will continue to be used in various industrial fields because IJST is a very significant form of environmentally conscious materials processing. The international symposium of IJST 2013 was held at Icho Kaikan, Osaka University, Japan from 27–29 November, 2013. A total of 138 participants came from around the world to attend 56 oral presentations and 36 posters presented at the symposium, and to discuss the latest research and developments on interfacial joining and surface technologies. This symposium was also held to commemorate the 30th anniversary of the Technical Commission on Interfacial Joining of the Japan Welding Society. On behalf of the chair of the symposium, it is my great pleasure to present this volume of IOP Conference Series: Materials Science and Engineering (MSE). Among the presentations, 43 papers are published here, and I believe all of the papers have provided the welding community with much useful information. I would like to thank the authors for their enthusiastic and excellent contributions. Finally, I would like to thank all members of the committees, secretariats, participants, and everyone who contributed to this symposium through their support and invaluable effort for the success of IJST 2013. Yasuo Takahashi Chair of IJST 2013

  9. An AES Study of the Room Temperature Surface Conditioning of Technological Metal Surfaces by Electron Irradiation

    OpenAIRE

    Scheuerlein, C; Hilleret, Noël; Taborelli, M; Brown, A; Baker, M A

    2002-01-01

    The modifications to technological copper and niobium surfaces induced by 2.5 keV electron irradiation have been investigated in the context of the conditioning process occurring in particle accelerator ultra high vacuum systems. Changes in the elemental surface composition have been found using Scanning Auger Microscopy (SAM) by monitoring the carbon, oxygen and metal Auger peak intensities as a function of electron irradiation in the dose range 10-6 to 10-2 C mm-2. The surface analysis resu...

  10. Multijunction Solar Cell Technology for Mars Surface Applications

    Science.gov (United States)

    Stella, Paul M.; Mardesich, Nick; Ewell, Richard C.; Mueller, Robert L.; Endicter, Scott; Aiken, Daniel; Edmondson, Kenneth; Fetze, Chris

    2006-01-01

    Solar cells used for Mars surface applications have been commercial space qualified AM0 optimized devices. Due to the Martian atmosphere, these cells are not optimized for the Mars surface and as a result operate at a reduced efficiency. A multi-year program, MOST (Mars Optimized Solar Cell Technology), managed by JPL and funded by NASA Code S, was initiated in 2004, to develop tools to modify commercial AM0 cells for the Mars surface solar spectrum and to fabricate Mars optimized devices for verification. This effort required defining the surface incident spectrum, developing an appropriate laboratory solar simulator measurement capability, and to develop and test commercial cells modified for the Mars surface spectrum. This paper discusses the program, including results for the initial modified cells. Simulated Mars surface measurements of MER cells and Phoenix Lander cells (2007 launch) are provided to characterize the performance loss for those missions. In addition, the performance of the MER rover solar arrays is updated to reflect their more than two (2) year operation.

  11. A micromachined calorimetric gas sensor: an application of electrodeposited nanostructured palladium for the detection of combustible gases.

    Science.gov (United States)

    Bartlett, Philip N; Guerin, Samuel

    2003-01-01

    Palladium films with regular nanoarchitectures were electrochemically deposited from the hexagonal (H1) lyotropic liquid crystalline phase of the nonionic surfactant octaethyleneglycol monohexadecyl ether (C16EO8) onto micromachined silicon hotplate structures. The H1-e Pd films were shown to have high surface areas (approximately 28 m2 g(-1)) and to act as effective and stable catalysts for the detection of methane in air on heating to 500 degrees C. The response of the H1-e Pd-coated planar pellistors was found to be linearly proportional to the concentration of methane between 0 and 2.5% in air with a detection limit below 0.125%. Our results show that the electrochemical deposition of nanostructured metal films offers a promising approach to the fabrication of micromachined calorimetric gas sensors for combustible gases.

  12. Habitats and Surface Construction Technology and Development Roadmap

    Science.gov (United States)

    Cohen, Marc; Kennedy, Kriss J.

    1997-01-01

    The vision of the technology and development teams at NASA Ames and Johnson Research Centers is to provide the capability for automated delivery and emplacement of habitats and surface facilities. The benefits of the program are as follows: Composites and Inflatables: 30-50% (goal) lighter than Al Hard Structures; Capability for Increased Habitable Volume, Launch Efficiency; Long Term Growth Potential; and Supports initiation of commercial and industrial expansion. Key Habitats and Surface Construction (H&SC) technology issues are: Habitat Shell Structural Materials; Seals and Mechanisms; Construction and Assembly: Automated Pro-Deploy Construction Systems; ISRU Soil/Construction Equipment: Lightweight and Lower Power Needs; Radiation Protection (Health and Human Performance Tech.); Life Support System (Regenerative Life Support System Tech.); Human Physiology of Long Duration Space Flight (Health and Human Performance Tech.); and Human Psychology of Long Duration Space Flight (Health and Human Performance Tech.) What is being done regarding these issues?: Use of composite materials for X-38 CRV, RLV, etc.; TransHAB inflatable habitat design/development; Japanese corporations working on ISRU-derived construction processes. What needs to be done for the 2004 Go Decision?: Characterize Mars Environmental Conditions: Civil Engineering, Material Durability, etc.; Determine Credibility of Inflatable Structures for Human Habitation; and Determine Seal Technology for Mechanisms and Hatches, Life Cycle, and Durability. An overview encompassing all of the issues above is presented.

  13. An AES Study of the Room Temperature Surface Conditioning of Technological Metal Surfaces by Electron Irradiation

    CERN Document Server

    Scheuerlein, C; Taborelli, M; Brown, A; Baker, M A

    2002-01-01

    The modifications to technological copper and niobium surfaces induced by 2.5 keV electron irradiation have been investigated in the context of the conditioning process occurring in particle accelerator ultra high vacuum systems. Changes in the elemental surface composition have been found using Scanning Auger Microscopy (SAM) by monitoring the carbon, oxygen and metal Auger peak intensities as a function of electron irradiation in the dose range 10-6 to 10-2 C mm-2. The surface analysis results are compared with electron dose dependent secondary electron and electron stimulated desorption yield measurements. Initially the electron irradiation causes a surface cleaning through electron stimulated desorption, in particular of hydrogen. During this period both the electron stimulated desorption and secondary electron yield decrease as a function of electron dose. When the electron dose exceeds 10-4 C mm-2 electron stimulated desorption yields are reduced by several orders of magnitude and the electron beam indu...

  14. Monitoring of yeast cell concentration using a micromachined impedance sensor

    NARCIS (Netherlands)

    Krommenhoek, E.E.; Gardeniers, Johannes G.E.; Bomer, Johan G.; van den Berg, Albert; Li, X.; Ottens, M.; van der Wielen, L.A.M.; van Dedem, G.W.K.; van Leeuwen, M.; van Gulik, W.M.; Heijnen, J.J.

    2005-01-01

    The paper describes the design, modelling and experimental characterization of a micromachined impedance sensor for on-line monitoring of the viable yeast cell concentration (biomass) in a miniaturized cell assay. Measurements in a Saccharomyces cerevisiae cell culture show that the permittivity of

  15. Development of a focused ion beam micromachining system

    Energy Technology Data Exchange (ETDEWEB)

    Pellerin, J.G.; Griffis, D.; Russell, P.E.

    1988-12-01

    Focused ion beams are currently being investigated for many submicron fabrication and analytical purposes. An FIB micromachining system consisting of a UHV vacuum system, a liquid metal ion gun, and a control and data acquisition computer has been constructed. This system is being used to develop nanofabrication and nanomachining techniques involving focused ion beams and scanning tunneling microscopes.

  16. Sub-band-gap laser micromachining of lithium niobate

    DEFF Research Database (Denmark)

    Christensen, F. K.; Müllenborn, Matthias

    1995-01-01

    method is reported which enables us to do laser processing of lithium niobate using sub-band-gap photons. Using high scan speeds, moderate power densities, and sub-band-gap photon energies results in volume removal rates in excess of 106µm3/s. This enables fast micromachining of small piezoelectric...

  17. Unveiling the wet chemical etching characteristics of polydimethylsiloxane film for soft micromachining applications

    International Nuclear Information System (INIS)

    Kakati, A; Maji, D; Das, S

    2017-01-01

    Micromachining of a polydimethylsiloxane (PDMS) microstructure by wet chemical etching is explored for microelectromechanical systems (MEMS) and microfluidic applications. A 100 µ m thick PDMS film was patterned with different microstructure designs by wet chemical etching using a N-methyl-2-pyrrolidone (C 16 H 36 FN) and tetra-n-butylammonium fluoride (C 5 H 9 NO) mixture solution with 3:1 volume ratio after lithography for studying etching characteristics. The patterning parameters, such as etch rate, surface roughness, pH of etchant solution with time, were thoroughly investigated. A detailed study of surface morphology with etching time revealed nonlinear behaviour of the PDMS surface roughness and etch rate. A maximum rate of 1.45 µ m min −1 for 10 min etching with surface roughness of 360 nm was achieved. A new approach of wet chemical etching with pH controlled doped etchant was introduced for lower surface roughness of etched microstructures, and a constant etch rate during etching. Variation of the etching rate and surface roughness by pH controlled etching was performed by doping 5–15 gm l −1 of silicic acid (SiO 2xH2 O) into the traditional etchant solution. PDMS etching by silicic acid doped etchant solution showed a reduction in surface roughness from 400 nm to 220 nm for the same 15 µ m etching. This study is beneficial for micromachining of various MEMS and microfluidic structures such as micropillars, microchannels, and other PDMS microstructures. (paper)

  18. Technologies for Nondestructive Evaluation of Surfaces and Thin Coatings

    Science.gov (United States)

    1999-01-01

    The effort included in this project included several related activities encompassing basic understanding, technological development, customer identification and commercial transfer of several methodologies for nondestructive evaluation of surfaces and thin surface coatings. Consistent with the academic environment, students were involved in the effort working with established investigators to further their training, provide a nucleus of experienced practitioners in the new technologies during their industrial introduction, and utilize their talents for project goals. As will be seen in various portions of the report, some of the effort has led to commercialization. This process has spawned other efforts related to this project which are supported from outside sources. These activities are occupying the efforts of some of the people who were previously supported within this grant and its predecessors. The most advanced of the supported technologies is thermography, for which the previous joint efforts of the investigators and NASA researchers have developed several techniques for extending the utility of straight thermographic inspection by producing methods of interpretation and analysis accessible to automatic image processing with computer data analysis. The effort reported for this technology has been to introduce the techniques to new user communities, who are then be able to add to the effective uses of existing products with only slight development work. In a related development, analysis of a thermal measurement situation in past efforts led to a new insight into the behavior of simple temperature probes. This insight, previously reported to the narrow community in which the particular measurement was made, was reported to the community of generic temperature measurement experts this year. In addition to the propagation of mature thermographic techniques, the development of a thermoelastic imaging system has been an important related development. Part of the

  19. A Novel Piezo-Actuator-Sensor Micromachine for Mechanical Characterization of Micro-Specimens

    Directory of Open Access Journals (Sweden)

    Leila Ladani

    2010-12-01

    Full Text Available Difficulties associated with testing and characterization of materials at microscale demands for new technologies and devices that are capable of measuring forces and strains at microscale. To address this issue, a novel electroactive-based micro-electro-mechanical machine is designed. The micromachine is comprised of two electroactive (piezoelectric micro-elements mounted on a rigid frame. Electrical activation of one of the elements causes it to expand and induce a stress in the intervening micro-specimen. The response of the microspecimen to the stress is measured by the deformation and thereby voltage/resistance induced in the second electro-active element. The concept is theoretically proven using analytical modeling in conjunction with non-linear, three dimensional finite element analyses for the micromachine. Correlation of the output voltage to the specimen stiffness is shown. It is also demonstrated through finite element and analytical analysis that this technique is capable of detecting non-linear behavior of materials. A characteristic curve for an isotropic specimen exhibiting linear elastic behavior is developed. Application of the proposed device in measuring coefficient of thermal expansion is explored and analytical analysis is conducted.

  20. New Material Development for Surface Layer and Surface Technology in Tribology Science to Improve Energy Efficiency

    International Nuclear Information System (INIS)

    Ismail, R.; Tauviqirrahman, M.; Jamari; Schipper, D. J.

    2009-01-01

    This paper reviews the development of new material and surface technology in tribology and its contribution to energy efficiency. Two examples of the economic benefits, resulted from the optimum tribology in the transportation sector and the manufacturing industry are discussed. The new materials are proposed to modify the surface property by laminating the bulk material with thin layer/coating. Under a suitable condition, the thin layer on a surface can provide a combination of good wear, a low friction and corrosion resistance for the mechanical components. The innovation in layer technology results molybdenum disulfide (MoS2), diamond like carbon (DLC), cubic boron nitride (CBN) and diamond which perform satisfactory outcome. The application of the metallic coatings to carbon fibre reinforced polymer matrix composites (CFRP) has the capacity to provide considerable weight and power savings for many engineering components. The green material for lubricant and additives such as the use of sunflower oil which possesses good oxidation resistance and the use of mallee leaves as bio‐degradable solvent are used to answer the demand of the environmentally friendly material with good performance. The tribology research implementation for energy efficiency also touches the simple things around us such as: erasing the laser‐print in a paper with different abrasion techniques. For the technology in the engineering surface, the consideration for generating the suitable surface of the components in running‐in period has been discussed in order to prolong the components life and reduce the machine downtime. The conclusion, tribology can result in reducing manufacturing time, reducing the maintenance requirements, prolonging the service interval, improving durability, reliability and mechanical components life, and reducing harmful exhaust emission and waste. All of these advantages will increase the energy efficiency and the economic benefits.

  1. New Material Development for Surface Layer and Surface Technology in Tribology Science to Improve Energy Efficiency

    Science.gov (United States)

    Ismail, R.; Tauviqirrahman, M.; Jamari, Jamari; Schipper, D. J.

    2009-09-01

    This paper reviews the development of new material and surface technology in tribology and its contribution to energy efficiency. Two examples of the economic benefits, resulted from the optimum tribology in the transportation sector and the manufacturing industry are discussed. The new materials are proposed to modify the surface property by laminating the bulk material with thin layer/coating. Under a suitable condition, the thin layer on a surface can provide a combination of good wear, a low friction and corrosion resistance for the mechanical components. The innovation in layer technology results molybdenum disulfide (MoS2), diamond like carbon (DLC), cubic boron nitride (CBN) and diamond which perform satisfactory outcome. The application of the metallic coatings to carbon fibre reinforced polymer matrix composites (CFRP) has the capacity to provide considerable weight and power savings for many engineering components. The green material for lubricant and additives such as the use of sunflower oil which possesses good oxidation resistance and the use of mallee leaves as bio-degradable solvent are used to answer the demand of the environmentally friendly material with good performance. The tribology research implementation for energy efficiency also touches the simple things around us such as: erasing the laser-print in a paper with different abrasion techniques. For the technology in the engineering surface, the consideration for generating the suitable surface of the components in running-in period has been discussed in order to prolong the components life and reduce the machine downtime. The conclusion, tribology can result in reducing manufacturing time, reducing the maintenance requirements, prolonging the service interval, improving durability, reliability and mechanical components life, and reducing harmful exhaust emission and waste. All of these advantages will increase the energy efficiency and the economic benefits.

  2. High surface area silicon materials: fundamentals and new technology.

    Science.gov (United States)

    Buriak, Jillian M

    2006-01-15

    Crystalline silicon forms the basis of just about all computing technologies on the planet, in the form of microelectronics. An enormous amount of research infrastructure and knowledge has been developed over the past half-century to construct complex functional microelectronic structures in silicon. As a result, it is highly probable that silicon will remain central to computing and related technologies as a platform for integration of, for instance, molecular electronics, sensing elements and micro- and nanoelectromechanical systems. Porous nanocrystalline silicon is a fascinating variant of the same single crystal silicon wafers used to make computer chips. Its synthesis, a straightforward electrochemical, chemical or photochemical etch, is compatible with existing silicon-based fabrication techniques. Porous silicon literally adds an entirely new dimension to the realm of silicon-based technologies as it has a complex, three-dimensional architecture made up of silicon nanoparticles, nanowires, and channel structures. The intrinsic material is photoluminescent at room temperature in the visible region due to quantum confinement effects, and thus provides an optical element to electronic applications. Our group has been developing new organic surface reactions on porous and nanocrystalline silicon to tailor it for a myriad of applications, including molecular electronics and sensing. Integration of organic and biological molecules with porous silicon is critical to harness the properties of this material. The construction and use of complex, hierarchical molecular synthetic strategies on porous silicon will be described.

  3. Piezoelectric micromachined ultrasonic transducers for fingerprint sensing

    Science.gov (United States)

    Lu, Yipeng

    Fingerprint identification is the most prevalent biometric technology due to its uniqueness, universality and convenience. Over the past two decades, a variety of physical mechanisms have been exploited to capture an electronic image of a human fingerprint. Among these, capacitive fingerprint sensors are the ones most widely used in consumer electronics because they are fabricated using conventional complementary metal oxide semiconductor (CMOS) integrated circuit technology. However, capacitive fingerprint sensors are extremely sensitive to finger contamination and moisture. This thesis will introduce an ultrasonic fingerprint sensor using a PMUT array, which offers a potential solution to this problem. In addition, it has the potential to increase security, as it allows images to be collected at various depths beneath the epidermis, providing images of the sub-surface dermis layer and blood vessels. Firstly, PMUT sensitivity is maximized by optimizing the layer stack and electrode design, and the coupling coefficient is doubled via series transduction. Moreover, a broadband PMUT with 97% fractional bandwidth is achieved by utilizing a thinner structure excited at two adjacent mechanical vibration modes with overlapping bandwidth. In addition, we proposed waveguide PMUTs, which function to direct acoustic waves, confine acoustic energy, and provide mechanical protection for the PMUT array. Furthermore, PMUT arrays were fabricated with different processes to form the membrane, including front-side etching with a patterned sacrificial layer, front-side etching with additional anchor, cavity SOI wafers and eutectic bonding. Additionally, eutectic bonding allows the PMUT to be integrated with CMOS circuits. PMUTs were characterized in the mechanical, electrical and acoustic domains. Using transmit beamforming, a narrow acoustic beam was achieved, and high-resolution (sub-100 microm) and short-range (~1 mm) pulse-echo ultrasonic imaging was demonstrated using a steel

  4. Utilization of the UV laser with picosecond pulses for the formation of surface microstructures on elastomeric plastics

    Science.gov (United States)

    Antoszewski, B.; Tofil, S.; Scendo, M.; Tarelnik, W.

    2017-08-01

    Elastomeric plastics belong to a wide range of polymeric materials with special properties. They are used as construction material for seals and other components in many branches of industry and, in particular, in the biomedical industry, mechatronics, electronics and chemical equipment. The micromachining of surfaces of these materials can be used to build micro-flow, insulating, dispensing systems and chemical and biological reactors. The paper presents results of research on the effects of micro-machining of selected elastomeric plastics using a UV laser emitting picosecond pulses. The authors see the prospective application of the developed technology in the sealing technique in particular to shaping the sealing pieces co-operating with the surface of the element. The result of the study is meant to show parameters of the UV laser’s performance when producing typical components such as grooves, recesses for optimum ablation in terms of quality and productivity.

  5. 3D Printing, Ink Casting and Micromachined Lamination (3D PICLμM): A Makerspace Approach to the Fabrication of Biological Microdevices

    OpenAIRE

    Avra Kundu; Tariq Ausaf; Swaminathan Rajaraman

    2018-01-01

    We present a novel benchtop-based microfabrication technology: 3D printing, ink casting, micromachined lamination (3D PICLμM) for rapid prototyping of lab-on-a-chip (LOC) and biological devices. The technology uses cost-effective, makerspace-type microfabrication processes, all of which are ideally suited for low resource settings, and utilizing a combination of these processes, we have demonstrated the following devices: (i) 2D microelectrode array (MEA) targeted at in vitro neural and cardi...

  6. Post-CMOS Micromachining of Surface and Bulk Structures

    Science.gov (United States)

    2002-05-06

    Structures iii Acknowledgements I would like to thank my advisors, Professor Gary K. Fedder and Professor Dave W. Greve, for their continuing support...Donnelly, Plasma Chem. Plasma Process, vol. 1, pp. 37, 1981. [54] J. L. Mauer, J. S. Logan, L. B. Zielinski , and G. S. Schwartz, J. Vac. Sci. Technol

  7. Symposium Gyro Technology 1997

    Energy Technology Data Exchange (ETDEWEB)

    Sorg, H [ed.; Stuttgart Univ. (Germany). Inst. A fuer Mechanik

    1997-10-01

    This volume includes the twenty papers which were presented at the Symposium Gyro Technology 1997. The subjects that have been treated during the symposium were as follows: Performance and design of silicon micromachined gyro; improved rate gyroscope designs designated for fabrication by modern deep silicon etching; micromechanical vibratory rate gyroscopes fabricated in conventional CMOS; error modelling of silicon angular rate sensor; a capacitive accelerometer as an example for surface micromachined inertial sensors; initial production results of a new family of fiber optic gyroscopes; dual-axis multiplexed open loop fiber optic gyroscope; flattely supported vibratory gyro-sensor using a Trident-type tuning fork resonator; innovative mechanizations to optimize inertial sensors for high or low rate operations; design of a planar vibratory gyroscope using electrostatic actuation and electromanetic detection; fiber optic gyro based land navigation system; FOG AHRS and AHRS/GPS navigation system: the low cost solution; GPS/GLONASS/INS-navigation (GLOGINAV); small-sized integrated system of the sea mobile objects attitude and navigation; concepts for hybrid positioning; preliminary results from a large ring laser gyroscope for fundamental physics and geophysics; a `sense of balance` - AHRS with low-cost vibrating-gyroscopes for medical diagnostics; application of strapdown inertial systems of orientation and navigation in intrapipe moving diagnostic apparatus; investigation of a digital readout system for laser gyro; the use of angular rate multiple integrals as input signals for strapdown attitude algorithms. (AKF)

  8. Pipeline coating inspection in Mexico applying surface electromagnetic technology

    Energy Technology Data Exchange (ETDEWEB)

    Delgado, O.; Mousatov, A.; Nakamura, E.; Villarreal, J.M. [Instituto Mexicano del Petroleo (IMP), Mexico City (Mexico); Shevnin, V. [Moscow State University (Russian Federation); Cano, B. [Petroleos Mexicanos (PEMEX), Mexico City (Mexico)

    2009-07-01

    The main problems in the pipeline systems in Mexico include: extremely aggressive soil characterized by a high clay content and low resistivity, interconnection between several pipes, including electrical contacts of active pipelines with out of service pipes, and short distances between pipes in comparison with their depths which reduce the resolution of coating inspection. The results presented in this work show the efficiency of the Surface Electromagnetic Pipeline Inspection (SEMPI) technology to determine the technical condition of pipelines in situations before mentioned. The SEMPI technology includes two stages: regional and detailed measurements. The regional stage consists of magnetic field measurements along the pipeline using large distances (10 - 100 m) between observation points to delimit zones with damaged coating. For quantitative assessing the leakage and coating resistances along pipeline, additional measurements of voltage and soil resistivity measurements are performed. The second stage includes detailed measurements of the electric field on the pipe intervals with anomalous technical conditions identified in the regional stage. Based on the distribution of the coating electric resistance and the subsoil resistivity values, the delimitation of the zones with different grade of coating quality and soil aggressiveness are performed. (author)

  9. Micromachined ultrasonic droplet generator based on a liquid horn structure

    Science.gov (United States)

    Meacham, J. M.; Ejimofor, C.; Kumar, S.; Degertekin, F. L.; Fedorov, A. G.

    2004-05-01

    A micromachined ultrasonic droplet generator is developed and demonstrated for drop-on-demand fluid atomization. The droplet generator comprises a bulk ceramic piezoelectric transducer for ultrasound generation, a reservoir for the ejection fluid, and a silicon micromachined liquid horn structure as the nozzle. The nozzles are formed using a simple batch microfabrication process that involves wet etching of (100) silicon in potassium hydroxide solution. Device operation is demonstrated by droplet ejection of water through 30 μm orifices at 1.49 and 2.30 MHz. The finite-element simulations of the acoustic fields in the cavity and electrical impedance of the device are in agreement with the measurements and indicate that the device utilizes cavity resonances in the 1-5 MHz range in conjunction with acoustic wave focusing by the pyramidally shaped nozzles to achieve low power operation.

  10. Surface physics of materials materials science and technology

    CERN Document Server

    Blakely, J M

    2013-01-01

    Surface Physics of Materials presents accounts of the physical properties of solid surfaces. The book contains selected articles that deal with research emphasizing surface properties rather than experimental techniques in the field of surface physics. Topics discussed include transport of matter at surfaces; interaction of atoms and molecules with surfaces; chemical analysis of surfaces; and adhesion and friction. Research workers, teachers and graduate students in surface physics, and materials scientist will find the book highly useful.

  11. Artificial intelligence: Collective behaviors of synthetic micromachines

    Science.gov (United States)

    Duan, Wentao

    Synthetic nano- and micromotors function through the conversion of chemical free energy or forms of energy into mechanical motion. Ever since the first reports, such motors have been the subject of growing interest. In addition to motility in response to gradients, these motors interact with each other, resulting in emergent collective behavior like schooling, exclusion, and predator-prey. However, most of these systems only exhibit a single type of collective behavior in response to a certain stimuli. The research projects in the disseratation aim at designing synthetic micromotors that can exhibit transition between various collective behaviors in response to different stimuli, as well as quantitative understanding on the pairwise interaction and propulsion mechanism of such motors. Chapter 1 offers an overview on development of synthetic micromachines. Interactions and collective behaviors of micromotors are also summarized and included. Chapter 2 presents a silver orthophosphate microparticle system that exhibits collective behaviors. Transition between two collective patterns, clustering and dispersion, can be triggered by shift in chemical equilibrium upon the addition or removal of ammonia, in response to UV light, or under two orthogonal stimuli (UV and acoustic field) and powering mechanisms. The transitions can be explained by the self-diffusiophoresis mechanism resulting from either ionic or neutral solute gradients. Potential applications of the reported system in logic gates, microscale pumping, and hierarchical assembly have been demonstrated. Chapter 3 introduces a self-powered oscillatory micromotor system in which active colloids form clusters whose size changes periodically. The system consists of an aqueous suspension of silver orthophosphate particles under UV radiation, in the presence of a mixture of glucose and hydrogen peroxide. The colloid particles first attract with each other to form clusters. After a lag time of around 5min, chemical

  12. Micromachined millimeter-wave photonic band-gap crystals

    International Nuclear Information System (INIS)

    Oezbay, E.; Michel, E.; Tuttle, G.; Biswas, R.; Sigalas, M.; Ho, K.

    1994-01-01

    We have developed a new technique for fabricating three-dimensional photonic band-gap crystals. Our method utilizes an orderly stacking of micromachined (110) silicon wafers to build the periodic structure. A structure with a full three-dimensional photonic band gap centered near 100 GHz was measured, with experimental results in good agreement with theoretical predictions. This basic approach described should be extendable to build structures with photonic band-gap frequencies ranging from 30 GHz to 3 THz

  13. Manufacture of Radio Frequency Micromachined Switches with Annealing

    OpenAIRE

    Lin, Cheng-Yang; Dai, Ching-Liang

    2014-01-01

    The fabrication and characterization of a radio frequency (RF) micromachined switch with annealing were presented. The structure of the RF switch consists of a membrane, coplanar waveguide (CPW) lines, and eight springs. The RF switch is manufactured using the complementary metal oxide semiconductor (CMOS) process. The switch requires a post-process to release the membrane and springs. The post-process uses a wet etching to remove the sacrificial silicon dioxide layer, and to obtain the suspe...

  14. A 16-bit sigma-delta modulator applied in micro-machined inertial sensors

    Science.gov (United States)

    Honglin, Xu; Qiang, Fu; Hongna, Liu; Liang, Yin; Pengfei, Wang; Xiaowei, Liu

    2014-04-01

    A fourth-order low-distortion low-pass sigma-delta (ΣΔ) modulator is presented for micro-machined inertial sensors. The proposed single-loop single-bit feedback modulator is optimized with a feed-forward path to decrease the nonlinearities and power consumption. The IC is implemented in a standard 0.6 μm CMOS technology and operates at a sampling frequency of 3.846 MHz. The chip area is 2.12 mm2 with 23 pads. The experimental results indicate a signal-to-noise ratio (SNR) of 100 dB and dynamic range (DR) of 103 dB at an oversampling rate (OSR) of 128 with the input signal amplitude of -3.88 dBFS at 9.8 kHz; the power consumption is 15 mW at a 5 V supply.

  15. A 16-bit sigma–delta modulator applied in micro-machined inertial sensors

    International Nuclear Information System (INIS)

    Xu Honglin; Fu Qiang; Liu Hongna; Yin Liang; Wang Pengfei; Liu Xiaowei

    2014-01-01

    A fourth-order low-distortion low-pass sigma–delta (ΣΔ) modulator is presented for micro-machined inertial sensors. The proposed single-loop single-bit feedback modulator is optimized with a feed-forward path to decrease the nonlinearities and power consumption. The IC is implemented in a standard 0.6 μm CMOS technology and operates at a sampling frequency of 3.846 MHz. The chip area is 2.12 mm 2 with 23 pads. The experimental results indicate a signal-to-noise ratio (SNR) of 100 dB and dynamic range (DR) of 103 dB at an oversampling rate (OSR) of 128 with the input signal amplitude of −3.88 dBFS at 9.8 kHz; the power consumption is 15 mW at a 5 V supply. (semiconductor integrated circuits)

  16. Micro-machinable polymer-derived ceramic sensors for high-temperature applications

    Science.gov (United States)

    Liu, Jian; Xu, Chengying; An, Linan

    2010-04-01

    Micro-sensors are highly desired for on-line temperature/pressure monitoring in turbine engines to improve their efficiency and reduce pollution. The biggest challenge for developing this type of sensors is that the sensors have to sustain at extreme environments in turbine engine environments, such as high-temperatures (>800 °C), fluctuated pressure and oxidation/corrosion surroundings. In this paper, we describe a class of sensors made of polymer-derived ceramics (PDCs) for such applications. PDCs have the following advantages over conventional ceramics, making them particularly suitable for these applications: (i) micromachining capability, (ii) tunable electric properties, and (iii) hightemperature capability. Here, we will discuss the materials and their properties in terms of their applications for hightemperature micro-sensors, and microfabrication technologies. In addition, we will also discuss the design of a heat-flux sensor based on polymer-derived ceramics.

  17. Micromachined On-Chip Dielectric Resonator Antenna Operating at 60 GHz

    KAUST Repository

    Sallam, Mai

    2015-06-01

    This paper presents a novel cylindrical Dielectric Resonator Antenna (DRA) suitable for millimeter-wave on-chip systems. The antenna was fabricated from a single high resistivity silicon wafer via micromachining technology. The new antenna was characterized using HFSS and experimentally with good agreement been found between the simulations and experiment. The proposed DRA has good radiation characteristics, where its gain and radiation efficiency are 7 dBi and 79.35%, respectively. These properties are reasonably constant over the working frequency bandwidth of the antenna. The return loss bandwidth was 2.23 GHz, which corresponds to 3.78% around 60 GHz. The antenna was primarily a broadside radiator with -15 dB cross polarization level.

  18. Frontside-micromachined planar piezoresistive vibration sensor: Evaluating performance in the low frequency test range

    Directory of Open Access Journals (Sweden)

    Lan Zhang

    2014-01-01

    Full Text Available Using a surface piezoresistor diffusion method and front-side only micromachining process, a planar piezoresistive vibration sensor was successfully developed with a simple structure, lower processing cost and fewer packaging difficulties. The vibration sensor had a large sector proof mass attached to a narrow flexure. Optimization of the boron diffusion piezoresistor placed on the edge of the narrow flexure greatly improved the sensitivity. Planar vibration sensors were fabricated and measured in order to analyze the effects of the sensor dimensions on performance, including the values of flexure width and the included angle of the sector. Sensitivities of fabricated planar sensors of 0.09–0.46 mV/V/g were measured up to a test frequency of 60 Hz. The sensor functioned at low voltages (<3 V and currents (<1 mA with a high sensitivity and low drift. At low background noise levels, the sensor had performance comparable to a commercial device.

  19. Frontside-micromachined planar piezoresistive vibration sensor: Evaluating performance in the low frequency test range

    Energy Technology Data Exchange (ETDEWEB)

    Zhang, Lan; Lu, Jian, E-mail: jian-lu@aist.go.jp; Takagi, Hideki; Maeda, Ryutaro [Research Center for Ubiquitous MEMS and Micro Engineering (UMEMSME), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki, 305-8564 (Japan)

    2014-01-15

    Using a surface piezoresistor diffusion method and front-side only micromachining process, a planar piezoresistive vibration sensor was successfully developed with a simple structure, lower processing cost and fewer packaging difficulties. The vibration sensor had a large sector proof mass attached to a narrow flexure. Optimization of the boron diffusion piezoresistor placed on the edge of the narrow flexure greatly improved the sensitivity. Planar vibration sensors were fabricated and measured in order to analyze the effects of the sensor dimensions on performance, including the values of flexure width and the included angle of the sector. Sensitivities of fabricated planar sensors of 0.09–0.46 mV/V/g were measured up to a test frequency of 60 Hz. The sensor functioned at low voltages (<3 V) and currents (<1 mA) with a high sensitivity and low drift. At low background noise levels, the sensor had performance comparable to a commercial device.

  20. A Flexible Ultrasound Transducer Array with Micro-Machined Bulk PZT

    Directory of Open Access Journals (Sweden)

    Zhe Wang

    2015-01-01

    Full Text Available This paper proposes a novel flexible piezoelectric micro-machined ultrasound transducer, which is based on PZT and a polyimide substrate. The transducer is made on the polyimide substrate and packaged with medical polydimethylsiloxane. Instead of etching the PZT ceramic, this paper proposes a method of putting diced PZT blocks into holes on the polyimide which are pre-etched. The device works in d31 mode and the electromechanical coupling factor is 22.25%. Its flexibility, good conformal contacting with skin surfaces and proper resonant frequency make the device suitable for heart imaging. The flexible packaging ultrasound transducer also has a good waterproof performance after hundreds of ultrasonic electric tests in water. It is a promising ultrasound transducer and will be an effective supplementary ultrasound imaging method in the practical applications.

  1. A flexible ultrasound transducer array with micro-machined bulk PZT.

    Science.gov (United States)

    Wang, Zhe; Xue, Qing-Tang; Chen, Yuan-Quan; Shu, Yi; Tian, He; Yang, Yi; Xie, Dan; Luo, Jian-Wen; Ren, Tian-Ling

    2015-01-23

    This paper proposes a novel flexible piezoelectric micro-machined ultrasound transducer, which is based on PZT and a polyimide substrate. The transducer is made on the polyimide substrate and packaged with medical polydimethylsiloxane. Instead of etching the PZT ceramic, this paper proposes a method of putting diced PZT blocks into holes on the polyimide which are pre-etched. The device works in d31 mode and the electromechanical coupling factor is 22.25%. Its flexibility, good conformal contacting with skin surfaces and proper resonant frequency make the device suitable for heart imaging. The flexible packaging ultrasound transducer also has a good waterproof performance after hundreds of ultrasonic electric tests in water. It is a promising ultrasound transducer and will be an effective supplementary ultrasound imaging method in the practical applications.

  2. Improving the Design of Capacitive Micromachined Ultrasonic Transducers Aided with Sensitivity Analysis

    Directory of Open Access Journals (Sweden)

    A Martowicz

    2016-09-01

    Full Text Available The paper presents the results of analysis performed to search for feasible design improvements for capacitive micromachined ultrasonic transducer. Carried out search has been aided with the sensitivity analysis and the application of Response Surface Method. The multiphysics approach has been taken into account in elaborated finite element model of one cell of described transducer in order to include significant physical phenomena present in modelled microdevice. The set of twelve input uncertain and design parameters consists of geometric, material and control properties. The amplitude of dynamic membrane deformation of the transducer has been chosen as studied parameter. The objective of performed study has been defined as the task of finding robust design configurations of the transducer, i.e. characterizing maximal value of deformation amplitude with its minimal variation.

  3. Micromachined silicon cantilevers with integrated high-frequency magnetoimpedance sensors for simultaneous strain and magnetic field detection

    Science.gov (United States)

    Buettel, G.; Joppich, J.; Hartmann, U.

    2017-12-01

    Giant magnetoimpedance (GMI) measurements in the high-frequency regime utilizing a coplanar waveguide with an integrated Permalloy multilayer and micromachined on a silicon cantilever are reported. The fabrication process is described in detail. The aspect ratio of the magnetic multilayer in the magnetoresistive and magnetostrictive device was varied. Tensile strain and compressive strain were applied. Vector network analyzer measurements in the range from the skin effect to ferromagnetic resonance confirm the technological potential of GMI-based micro-electro-mechanical devices for strain and magnetic field sensing applications. The strain-impedance gauge factor was quantified by finite element strain calculations and reaches a maximum value of almost 200.

  4. G-Protein Coupled Receptors: Surface Display and Biosensor Technology

    Science.gov (United States)

    McMurchie, Edward; Leifert, Wayne

    Signal transduction by G-protein coupled receptors (GPCRs) underpins a multitude of physiological processes. Ligand recognition by the receptor leads to the activation of a generic molecular switch involving heterotrimeric G-proteins and guanine nucleotides. With growing interest and commercial investment in GPCRs in areas such as drug targets, orphan receptors, high-throughput screening of drugs and biosensors, greater attention will focus on assay development to allow for miniaturization, ultrahigh-throughput and, eventually, microarray/biochip assay formats that will require nanotechnology-based approaches. Stable, robust, cell-free signaling assemblies comprising receptor and appropriate molecular switching components will form the basis of future GPCR/G-protein platforms, which should be able to be adapted to such applications as microarrays and biosensors. This chapter focuses on cell-free GPCR assay nanotechnologies and describes some molecular biological approaches for the construction of more sophisticated, surface-immobilized, homogeneous, functional GPCR sensors. The latter points should greatly extend the range of applications to which technologies based on GPCRs could be applied.

  5. Freeform micromachining of an infrared Alvarez lens

    Science.gov (United States)

    Smilie, Paul J.; Dutterer, Brian S.; Lineberger, Jennifer L.; Davies, Matthew A.; Suleski, Thomas J.

    2011-02-01

    In 1967, Luis Alvarez introduced a novel concept for a focusing lens whereby two transmitting elements with cubic polynomial surfaces yield a composite lens of variable focal length with small lateral shifts. Computer simulations have demonstrated the behavior of these devices, but fabricating the refractive cubic surfaces of the types needed with adequate precision and depth modulation has proven to be challenging using standard methods, and, to the authors' knowledge, Alvarez lens elements have not been previously machined in infrared materials. Recent developments in freeform diamond machining capability have enabled the fabrication of such devices. In this paper, we discuss the fabrication of freeform refractive Alvarez elements in germanium using diamond micro-milling on a five-axis Moore Nanotech® 350FG Freeform Generator. Machining approaches are discussed, and measurements of surface figure and finish are presented. Initial experimental tests of optical performance are also discussed.

  6. Micromachining of buried micro channels in silicon

    NARCIS (Netherlands)

    de Boer, Meint J.; Tjerkstra, R.W.; Berenschot, Johan W.; Jansen, Henricus V.; Burger, G.J.; Burger, G.J.; Gardeniers, Johannes G.E.; Elwenspoek, Michael Curt; van den Berg, Albert

    A new method for the fabrication of micro structures for fluidic applications, such as channels, cavities, and connector holes in the bulk of silicon wafers, called buried channel technology (BCT), is presented in this paper. The micro structures are constructed by trench etching, coating of the

  7. Micromachining of inertial confinement fusion targets

    International Nuclear Information System (INIS)

    Gobby, P.L.; Salzer, L.J.; Day, R.D.

    1996-01-01

    Many experiments conducted on today's largest inertial confinement fusion drive lasers require target components with sub-millimeter dimensions, precisions of a micron or less and surface finishes measured in nanometers. For metal and plastic, techniques using direct machining with diamond tools have been developed that yield the desired parts. New techniques that will be discussed include the quick-flip locator, a magnetically held kinematic mount that has allowed the direct machining of millimeter-sized beryllium hemishells whose inside and outside surface are concentric to within 0.25 micron, and an electronic version of a tracer lathe which has produced precise azimuthal variations of less than a micron

  8. A review of micromachined thermal accelerometers

    Science.gov (United States)

    Mukherjee, Rahul; Basu, Joydeep; Mandal, Pradip; Guha, Prasanta Kumar

    2017-12-01

    A thermal convection based micro-electromechanical accelerometer is a relatively new kind of acceleration sensor that does not require a solid proof mass, yielding unique benefits like high shock survival rating, low production cost, and integrability with CMOS integrated circuit technology. This article provides a comprehensive survey of the research, development, and current trends in the field of thermal acceleration sensors, with detailed enumeration on the theory, operation, modeling, and numerical simulation of such devices. Different reported varieties and structures of thermal accelerometers have been reviewed highlighting key design, implementation, and performance aspects. Materials and technologies used for fabrication of such sensors have also been discussed. Further, the advantages and challenges for thermal accelerometers vis-à-vis other prominent accelerometer types have been presented, followed by an overview of associated signal conditioning circuitry and potential applications.

  9. Fission Surface Power Technology Demonstration Unit Test Results

    Science.gov (United States)

    Briggs, Maxwell H.; Gibson, Marc A.; Geng, Steven M.; Sanzi, James L.

    2016-01-01

    The Fission Surface Power (FSP) Technology Demonstration Unit (TDU) is a system-level demonstration of fission power technology intended for use on manned missions to Mars. The Baseline FSP systems consists of a 190 kWt UO2 fast-spectrum reactor cooled by a primary pumped liquid metal loop. This liquid metal loop transfers heat to two intermediate liquid metal loops designed to isolate fission products in the primary loop from the balance of plant. The intermediate liquid metal loops transfer heat to four Stirling Power Conversion Units (PCU), each of which produce 12 kWe (48 kW total) and reject waste heat to two pumped water loops, which transfer the waste heat to titanium-water heat pipe radiators. The FSP TDU simulates a single leg of the baseline FSP system using an electrically heater core simulator, a single liquid metal loop, a single PCU, and a pumped water loop which rejects the waste heat to a Facility Cooling System (FCS). When operated at the nominal operating conditions (modified for low liquid metal flow) during TDU testing the PCU produced 8.9 kW of power at an efficiency of 21.7 percent resulting in a net system power of 8.1 kW and a system level efficiency of 17.2 percent. The reduction in PCU power from levels seen during electrically heated testing is the result of insufficient heat transfer from the NaK heater head to the Stirling acceptor, which could not be tested at Sunpower prior to delivery to the NASA Glenn Research Center (GRC). The maximum PCU power of 10.4 kW was achieved at the maximum liquid metal temperature of 875 K, minimum water temperature of 350 K, 1.1 kg/s liquid metal flow, 0.39 kg/s water flow, and 15.0 mm amplitude at an efficiency of 23.3 percent. This resulted in a system net power of 9.7 kW and a system efficiency of 18.7 percent.

  10. Vibrotactile using micromachined electromagnetic actuators array

    International Nuclear Information System (INIS)

    Talbi, A; Ducloux, O; Tiercelin, N; Deblock, Y; Pernod, P; Preobrazhensky, V

    2006-01-01

    One motivating application of this technology is the development of a tactile display interface, where discrete mechanical actuators apply vibratory excitation at discrete locations on the skin. Specifically, this paper describes the development fabrication and characterization of a 4 x 4 micro-actuator array of vibrating pixels for fingertip tactile communication. The vibrting pixels are generated by using an electromagnetic microresonator. The fabrication sequence and the actuation performance of the array are also presented

  11. Real-time control of ultrafast laser micromachining by laser-induced breakdown spectroscopy

    International Nuclear Information System (INIS)

    Tong Tao; Li Jinggao; Longtin, Jon P.

    2004-01-01

    Ultrafast laser micromachining provides many advantages for precision micromachining. One challenging problem, however, particularly for multilayer and heterogeneous materials, is how to prevent a given material from being ablated, as ultrafast laser micromachining is generally material insensitive. We present a real-time feedback control system for an ultrafast laser micromachining system based on laser-induced breakdown spectroscopy (LIBS). The characteristics of ultrafast LIBS are reviewed and discussed so as to demonstrate the feasibility of the technique. Comparison methods to identify the material emission patterns are developed, and several of the resulting algorithms were implemented into a real-time computer control system. LIBS-controlled micromachining is demonstrated for the fabrication of microheater structures on thermal sprayed materials. Compared with a strictly passive machining process without any such feedback control, the LIBS-based system provides several advantages including less damage to the substrate layer, reduced machining time, and more-uniform machining features

  12. Micromachining. CERN Courier, Jul-Aug 1995, v. 35(5)

    International Nuclear Information System (INIS)

    Wilson, Martin

    1995-01-01

    Full text: As well as making microcircuit components, X-ray lithography can also be used to make very small mechanical parts, either by using directly the exposed and developed photoresist, or as a mould to produce the component in another material such as ceramic or metal. In this revolutionary technology, metal components are made via the LIGA (Lithographic Galvanoformung und Abformung) technique in which the exposed and developed photoresist is coated with a conducting material and then electroplated, after which the resist is stripped away. In addition to fine size and precision resolution, X-rays offer the advantage of deep penetration and small scattering through the resist, so that patterns may be up to a millimetre deep, with very accurate straightness in directions parallel to the beam. Micromachining via LIGA was developed at KfK Karlsruhe; commercialization and further development is being vigorously pursued by the Institut fur Mikrotechnik in Mainz and by Microparts GmbH in Karlsruhe. Significant developments have been made at the Synchrotron Radiation Centre in Madison, Wisconsin, with new programmes start-ing at SRRC (Taiwan), CAMD (Baton Rouge, Louisiana), and LURE (Paris). There is now an active European Special Interest Group for LIGA. Commercially manufactured micromachines are starting to be used in sensors and connectors. The ability to integrate microdevices with microelectronics raises many interesting possibilities for the future, notably in medicine and for intelligent sensors. In all cases, however, widespread adoption will be governed by the ability to mass-produce cheaply, requiring high volume production. The high intensities of synchrotron radiation will assist in achieving these large throughputs

  13. High-intensity fibre laser design for micro-machining applications

    Science.gov (United States)

    Ortiz-Neria, D. I.; Martinez-Piñón, F.; Hernandez-Escamilla, H.; Alvarez-Chavez, J. A.

    2010-11-01

    This work is focused on the design of a 250W high-intensity continuous-wave fibre optic laser with a 15μm spot size beam and a beam parameter product (BPP) of 1.8 for its use on Laser-assisted Cold Spray process (LCS) in the micro-machining areas. The metal-powder deposition process LCS, is a novel method based on Cold Spray technique (CS) assisted by laser technology. The LCS accelerates metal powders by the use of a high-pressure gas in order to achieve flash welding of particles over substrate. In LCS, the critical velocity of impact is lower with respect with CS while the powder particle is heated before the deposition by a laser beam. Furthermore, LCS does not heat the powder to achieve high temperatures as it happens in plasma processes. This property puts aside cooling problems which normally happen in sintered processes with high oxygen/nitrogen concentration levels. LCS will be used not only in deposition of thin layers. After careful design, proof of concept, experimental data, and prototype development, it should be feasible to perform micro-machining precise work with the use of the highintensity fibre laser presented in this work, and selective deposition of particles, in a similar way to the well-known Direct Metal Laser Sintering process (DMLS). The fibre laser consists on a large-mode area, Yb3+-doped, semi-diffraction limited, 25-m fibre laser cavity, operating in continuous wave regime. The fibre shows an arguably high slope-efficiency with no signs of roll-over. The measured M2 value is 1.8 and doping concentration of 15000ppm. It was made with a slight modification of the traditional MCVD technique. A full optical characterization will be presented.

  14. Biomimetic surface modification of polypropylene by surface chain transfer reaction based on mussel-inspired adhesion technology and thiol chemistry

    Energy Technology Data Exchange (ETDEWEB)

    Niu, Zhijun; Zhao, Yang; Sun, Wei; Shi, Suqing, E-mail: shisq@nwu.edu.cn; Gong, Yongkuan

    2016-11-15

    Highlights: • Biomimetic surface modification of PP was successfully conducted by integrating mussel-inspired technology, thiol chemistry and cell outer membranes-like structures. • The resultant biomimetic surface exhibits good interface and surface stability. • The obvious suppression of protein adsorption and platelet adhesion is also achieved. • The residue thoil groups on the surface could be further functionalized. - Abstract: Biomimetic surface modification of polypropylene (PP) is conducted by surface chain transfer reaction based on the mussel-inspired versatile adhesion technology and thiol chemistry, using 2-methacryloyloxyethylphosphorylcholine (MPC) as a hydrophilic monomer mimicking the cell outer membrane structure and 2,2-azobisisobutyronitrile (AIBN) as initiator in ethanol. A layer of polydopamine (PDA) is firstly deposited onto PP surface, which not only offers good interfacial adhesion with PP, but also supplies secondary reaction sites (-NH{sub 2}) to covalently anchor thiol groups onto PP surface. Then the radical chain transfer to surface-bonded thiol groups and surface re-initiated polymerization of MPC lead to the formation of a thin layer of polymer brush (PMPC) with cell outer membrane mimetic structure on PP surface. X-ray photoelectron spectrophotometer (XPS), atomic force microscopy (AFM) and water contact angle measurements are used to characterize the PP surfaces before and after modification. The protein adsorption and platelet adhesion experiments are also employed to evaluate the interactions of PP surface with biomolecules. The results show that PMPC is successfully grafted onto PP surface. In comparison with bare PP, the resultant PP-PMPC surface exhibits greatly improved protein and platelet resistance performance, which is the contribution of both increased surface hydrophilicity and zwitterionic structure. More importantly, the residue thiol groups on PP-PMPC surface create a new pathway to further functionalize such

  15. Biomimetic surface modification of polypropylene by surface chain transfer reaction based on mussel-inspired adhesion technology and thiol chemistry

    International Nuclear Information System (INIS)

    Niu, Zhijun; Zhao, Yang; Sun, Wei; Shi, Suqing; Gong, Yongkuan

    2016-01-01

    Highlights: • Biomimetic surface modification of PP was successfully conducted by integrating mussel-inspired technology, thiol chemistry and cell outer membranes-like structures. • The resultant biomimetic surface exhibits good interface and surface stability. • The obvious suppression of protein adsorption and platelet adhesion is also achieved. • The residue thoil groups on the surface could be further functionalized. - Abstract: Biomimetic surface modification of polypropylene (PP) is conducted by surface chain transfer reaction based on the mussel-inspired versatile adhesion technology and thiol chemistry, using 2-methacryloyloxyethylphosphorylcholine (MPC) as a hydrophilic monomer mimicking the cell outer membrane structure and 2,2-azobisisobutyronitrile (AIBN) as initiator in ethanol. A layer of polydopamine (PDA) is firstly deposited onto PP surface, which not only offers good interfacial adhesion with PP, but also supplies secondary reaction sites (-NH 2 ) to covalently anchor thiol groups onto PP surface. Then the radical chain transfer to surface-bonded thiol groups and surface re-initiated polymerization of MPC lead to the formation of a thin layer of polymer brush (PMPC) with cell outer membrane mimetic structure on PP surface. X-ray photoelectron spectrophotometer (XPS), atomic force microscopy (AFM) and water contact angle measurements are used to characterize the PP surfaces before and after modification. The protein adsorption and platelet adhesion experiments are also employed to evaluate the interactions of PP surface with biomolecules. The results show that PMPC is successfully grafted onto PP surface. In comparison with bare PP, the resultant PP-PMPC surface exhibits greatly improved protein and platelet resistance performance, which is the contribution of both increased surface hydrophilicity and zwitterionic structure. More importantly, the residue thiol groups on PP-PMPC surface create a new pathway to further functionalize such

  16. Investigation on the micromilled surface characterization through replica technology

    DEFF Research Database (Denmark)

    Baruffi, Federico; Parenti, P.; Cacciatore, F.

    2016-01-01

    for the indirect measurement of micromilled surfaces, characterized by submicrometer roughness levels. The study assesses the performance of the replication method by measuring the surface roughness (in terms of Sa) of specifically designed micromilled flat surfaces. A 3D confocal optical microscope is employed...

  17. Capacitive micromachined ultrasonic transducer arrays as tunable acoustic metamaterials

    Energy Technology Data Exchange (ETDEWEB)

    Lani, Shane W., E-mail: shane.w.lani@gmail.com, E-mail: karim.sabra@me.gatech.edu, E-mail: levent.degertekin@me.gatech.edu; Sabra, Karim G. [George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, 801Ferst Drive, Georgia 30332-0405 (United States); Wasequr Rashid, M.; Hasler, Jennifer [School of Electrical and Computer Engineering, Georgia Institute of Technology, Van Leer Electrical Engineering Building, 777 Atlantic Drive NW, Atlanta, Georgia 30332-0250 (United States); Levent Degertekin, F. [George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, 801Ferst Drive, Georgia 30332-0405 (United States); School of Electrical and Computer Engineering, Georgia Institute of Technology, Van Leer Electrical Engineering Building, 777 Atlantic Drive NW, Atlanta, Georgia 30332-0250 (United States)

    2014-02-03

    Capacitive Micromachined Ultrasonic Transducers (CMUTs) operating in immersion support dispersive evanescent waves due to the subwavelength periodic structure of electrostatically actuated membranes in the array. Evanescent wave characteristics also depend on the membrane resonance which is modified by the externally applied bias voltage, offering a mechanism to tune the CMUT array as an acoustic metamaterial. The dispersion and tunability characteristics are examined using a computationally efficient, mutual radiation impedance based approach to model a finite-size array and realistic parameters of variation. The simulations are verified, and tunability is demonstrated by experiments on a linear CMUT array operating in 2-12 MHz range.

  18. Micromachined integrated quantum circuit containing a superconducting qubit

    Science.gov (United States)

    Brecht, Teresa; Chu, Yiwen; Axline, Christopher; Pfaff, Wolfgang; Blumoff, Jacob; Chou, Kevin; Krayzman, Lev; Frunzio, Luigi; Schoelkopf, Robert

    We demonstrate a functional multilayer microwave integrated quantum circuit (MMIQC). This novel hardware architecture combines the high coherence and isolation of three-dimensional structures with the advantages of integrated circuits made with lithographic techniques. We present fabrication and measurement of a two-cavity/one-qubit prototype, including a transmon coupled to a three-dimensional microwave cavity micromachined in a silicon wafer. It comprises a simple MMIQC with competitive lifetimes and the ability to perform circuit QED operations in the strong dispersive regime. Furthermore, the design and fabrication techniques that we have developed are extensible to more complex quantum information processing devices.

  19. High-power ultrashort fiber laser for solar cells micromachining

    Science.gov (United States)

    Lecourt, J.-B.; Duterte, C.; Liegeois, F.; Lekime, D.; Hernandez, Y.; Giannone, D.

    2012-02-01

    We report on a high-power ultra-short fiber laser for thin film solar cells micromachining. The laser is based on Chirped Pulse Amplification (CPA) scheme. The pulses are stretched to hundreds of picoseconds prior to amplification and can be compressed down to picosecond at high energy. The repetition rate is adjustable from 100 kHz to 1 MHz and the optical average output power is close to 13 W (before compression). The whole setup is fully fibred, except the compressor achieved with bulk gratings, resulting on a compact and reliable solution for cold ablation.

  20. High-frequency micro-machined power inductors

    International Nuclear Information System (INIS)

    Wang, N.; O'Donnell, T.; Roy, S.; Brunet, M.; McCloskey, P.; O'Mathuna, S.C.

    2005-01-01

    Power inductors have been fabricated on silicon substrates using low-temperature IC compatible processes. The electrical properties of these micro-inductors have been measured and discussed. A maximum quality factor of 6 at 4 MHz has been achieved with an inductance value of about 160 nH. The DC saturation currents of the non-gapped and gapped inductors are ∼500 and 700 mA, respectively. The relatively high Q factor and the load current characteristics allow these micro-machined inductors to be used in integrated power converters

  1. Predictive modeling, simulation, and optimization of laser processing techniques: UV nanosecond-pulsed laser micromachining of polymers and selective laser melting of powder metals

    Science.gov (United States)

    Criales Escobar, Luis Ernesto

    Institute for Standards & Technology via response surface methodology techniques. The main goal of this research is to develop a comprehensive predictive model with which the effect of powder material properties and laser process parameters on the built quality and integrity of SLM-produced parts can be better understood. By optimizing process parameters, SLM as an additive manufacturing technique is not only possible, but also practical and reproducible.

  2. Evaluation of Coating Removal and Aggressive Surface Removal Surface Technologies Applied to Concrete Walls, Brick Walls, and Concrete Ceilings

    International Nuclear Information System (INIS)

    Ebadian, M.A.; Lagos, L.E.

    1997-01-01

    The purpose of this investigation was to test and evaluate innovative and commercially available technologies for the surface decontamination of walls and ceilings. This investigation supports the DOE's objectives of reducing risks to human health and the environment through its restoration projects at FEMP and MEMP. This project was performed at the Hemispheric Center for Environmental Technology (HCET) at Florida International University (FIU), where one innovative and four commercially available decontamination technologies were evaluated under standard, non-nuclear testing conditions. The performance data generated by this project will assist DOE site managers in the selection of the safest, most efficient, and most cost-effective decontamination technologies to accomplish their remediation objectives

  3. Laser micromachining of chemically altered polymers

    Energy Technology Data Exchange (ETDEWEB)

    Lippert, T.

    1998-08-01

    During the last decade laser processing of polymers has become an important field of applied and fundamental research. One of the most promising proposals, to use laser ablation as dry etching technique in photolithography, has not yet become an industrial application. Many disadvantages of laser ablation, compared to conventional photolithography, are the result of the use of standard polymers. These polymers are designed for totally different applications, but are compared to the highly specialized photoresist. A new approach to laser polymer ablation will be described; the development of polymers, specially designed for high resolution laser ablation. These polymers have photolabile groups in the polymer backbone, which decompose upon laser irradiation or standard polymers are modified for ablation at a specific irradiation wavelength. The absorption maximum can be tailored for specific laser emissino lines, e.g. 351, 308 and 248 nm lines of excimer lasers. The authors show that with this approach many problems associated with the application of laser ablation for photolithography can be solved. The mechanism of ablation for these photopolymers is photochemical, whereas for most of the standard polymers this mechanism is photothermal. The photochemical decomposition mechanism results in high resolution ablation with no thermal damage at the edges of the etched structures. In addition there are no redeposited ablation products or surface modifications of the polymer after ablation.

  4. Mechanical characterization of biocompatible thin film materials by scanning along micro-machined cantilevers for micro-/nano-system

    International Nuclear Information System (INIS)

    He, J.H.; Luo, J.K.; Le, H.R.; Moore, D.F.

    2006-01-01

    Mechanical characterization is vital for the design of micro-/nano-electro-mechanical system (MEMS/NEMS). This paper describes a new characterization method to extract the mechanical properties of the thin film materials, which is simple, inexpensive and applicable to a wide range of materials including biocompatible ones described in this paper. The beams of the material under tests, are patterned by laser micro-machining and released by alkaline etch. A surface profilometer is used to scan along micro-machined cantilevers and produce a bending profile, from which the Young's modulus can be extracted. Biocompatible SiN x , SiC and nanocrystal diamond cantilevers have been fabricated and their Young's modulus has been evaluated as 154 ± 12, 360 ± 50 and 504 ± 50 GPa, respectively, which is consistent with those measured by nano-indentation. Residual stress gradient has also been extracted by surface profilometer, which is comparable with the results inferred from ZYGO interferometer measurements. This method can be extended to atomic force microscopy stylus or nanometer-stylus profilometer for Bio-NEMS mechanical characterization

  5. Hybrid micromachining using a nanosecond pulsed laser and micro EDM

    International Nuclear Information System (INIS)

    Kim, Sanha; Chung, Do Kwan; Shin, Hong Shik; Chu, Chong Nam; Kim, Bo Hyun

    2010-01-01

    Micro electrical discharge machining (micro EDM) is a well-known precise machining process that achieves micro structures of excellent quality for any conductive material. However, the slow machining speed and high tool wear are main drawbacks of this process. Though the use of deionized water instead of kerosene as a dielectric fluid can reduce the tool wear and increase the machine speed, the material removal rate (MRR) is still low. In contrast, laser ablation using a nanosecond pulsed laser is a fast and non-wear machining process but achieves micro figures of rather low quality. Therefore, the integration of these two processes can overcome the respective disadvantages. This paper reports a hybrid process of a nanosecond pulsed laser and micro EDM for micromachining. A novel hybrid micromachining system that combines the two discrete machining processes is introduced. Then, the feasibility and characteristics of the hybrid machining process are investigated compared to conventional EDM and laser ablation. It is verified experimentally that the machining time can be effectively reduced in both EDM drilling and milling by rapid laser pre-machining prior to micro EDM. Finally, some examples of complicated 3D micro structures fabricated by the hybrid process are shown

  6. Laser micromachining of biofactory-on-a-chip devices

    Science.gov (United States)

    Burt, Julian P.; Goater, Andrew D.; Hayden, Christopher J.; Tame, John A.

    2002-06-01

    Excimer laser micromachining provides a flexible means for the manufacture and rapid prototyping of miniaturized systems such as Biofactory-on-a-Chip devices. Biofactories are miniaturized diagnostic devices capable of characterizing, manipulating, separating and sorting suspension of particles such as biological cells. Such systems operate by exploiting the electrical properties of microparticles and controlling particle movement in AC non- uniform stationary and moving electric fields. Applications of Biofactory devices are diverse and include, among others, the healthcare, pharmaceutical, chemical processing, environmental monitoring and food diagnostic markets. To achieve such characterization and separation, Biofactory devices employ laboratory-on-a-chip type components such as complex multilayer microelectrode arrays, microfluidic channels, manifold systems and on-chip detection systems. Here we discuss the manufacturing requirements of Biofactory devices and describe the use of different excimer laser micromachined methods both in stand-alone processes and also in conjunction with conventional fabrication processes such as photolithography and thermal molding. Particular attention is given to the production of large area multilayer microelectrode arrays and the manufacture of complex cross-section microfluidic channel systems for use in simple distribution and device interfacing.

  7. Parametric Surfaces Competition: Using Technology to Foster Creativity

    Science.gov (United States)

    Kaur, Manmohan; Wangler, Thomas

    2014-01-01

    Although most calculus students are comfortable with the Cartesian equations of curves and surfaces, they struggle with the concept of parameters. A multivariable calculus course is really the time to nail this concept down, once and for all, since it provides an easy way to represent many beautiful and useful surfaces, and graph them using a…

  8. Fabrication and Characterization of Capacitive Micromachined Ultrasonic Transducers with Low-Temperature Wafer Direct Bonding

    Directory of Open Access Journals (Sweden)

    Xiaoqing Wang

    2016-12-01

    Full Text Available This paper presents a fabrication method of capacitive micromachined ultrasonic transducers (CMUTs by wafer direct bonding, which utilizes both the wet chemical and O2plasma activation processes to decrease the bonding temperature to 400 °C. Two key surface properties, the contact angle and surface roughness, are studied in relation to the activation processes, respectively. By optimizing the surface activation parameters, a surface roughness of 0.274 nm and a contact angle of 0° are achieved. The infrared images and static deflection of devices are assessed to prove the good bonding effect. CMUTs having silicon membranes with a radius of 60 μm and a thickness of 2 μm are fabricated. Device properties have been characterized by electrical and acoustic measurements to verify their functionality and thus to validate this low-temperature process. A resonant frequency of 2.06 MHz is obtained by the frequency response measurements. The electrical insertion loss and acoustic signal have been evaluated. This study demonstrates that the CMUT devices can be fabricated by low-temperature wafer direct bonding, which makes it possible to integrate them directly on top of integrated circuit (IC substrates.

  9. Electron stimulated desorption of gases at technological surfaces of aluminium

    International Nuclear Information System (INIS)

    Ding, M.Q.; Williams, E.M.

    1989-01-01

    The release of gas by electron bombardment at aluminium alloy surfaces in vacuum -9 torr has been investigated for a range of treatments including bakeout and glow discharge cleaning. Particular attention has been given to the role of continuous electron bombardment, with current densities and electron energies of up to 1.5 mA cm -2 and 2.0 keV, respectively, over the 10 cm 2 of surface area under irradiation. The observations of desorption efficiency, defined as the number of desorbed molecules per incident electron, conform to a model involving a dynamic balance between adsorption and desorption, with contributions to adsorption from both surface and sub-surface gas. Continuous electron bombardment promotes a surface with low desorption efficiency, -5 mol/electron, however, the conditioning cycle is accelerated significantly by glow discharge treatment. There is evidence of some short-term memory when the samples are exposed to air. (author)

  10. A comparative analysis of strategic approaches for Information Technology (IT) for Commander Naval Surface Forces

    OpenAIRE

    Johnson, Devine R.

    2010-01-01

    Approved for public release; distribution is unlimited As the lead organization for all United States Naval Surface Forces, Commander Naval Surface Forces (CNSF) is committed to providing operational commanders with well-trained, highly effective, and technologically relevant surface forces. Aligning itself with the Department of the Navy's Information Management (IM) and Information Technology (IT) strategic mission objectives, CNSF is dedicated to delivering secure, interoperable, and in...

  11. Pure Surface Texture Mapping Technology and it's Application for Mirror Image

    Directory of Open Access Journals (Sweden)

    Wei Feng Wang

    2013-02-01

    Full Text Available Based on the study of pure surface texture mapping technology, pure texture surface rendering method is proposed. The method is combined pure surface texture rendering and view mirror, real-time rendering has an index of refraction, reflection, and the flow of water ripple effect. Through the experimental verification of the validity of the algorithm.

  12. Effects of Laser Operating Parameters on Piezoelectric Substrates Micromachining with Picosecond Laser

    Directory of Open Access Journals (Sweden)

    Lamia EL Fissi

    2014-12-01

    Full Text Available Ten picoseconds (200 kHz ultrafast laser micro-structuring of piezoelectric substrates including AT-cut quartz, Lithium Niobate and Lithium Tantalate have been studied for the purpose of piezoelectric devices application ranging from surface acoustic wave devices, e.g., bandpass filters, to photonic devices such as optical waveguides and holograms. The study examines the impact of changing several laser parameters on the resulting microstructural shapes and morphology. The micromachining rate has been observed to be strongly dependent on the operating parameters, such as the pulse fluence, the scan speed and the scan number. The results specifically indicate that ablation at low fluence and low speed scan tends to form a U-shaped cross-section, while a V-shaped profile can be obtained by using a high fluence and a high scan speed. The evolution of surface morphology revealed that laser pulses overlap in a range around 93% for both Lithium Niobate (LiNbO3 and Lithium Tantalate (LiTaO3 and 98% for AT-cut quartz can help to achieve optimal residual surface roughness.

  13. A bulk micromachined lead zinconate titanate cantilever energy harvester with inter-digital IrO(x) electrodes.

    Science.gov (United States)

    Park, Jongcheol; Park, Jae Yeong

    2013-10-01

    A piezoelectric vibration energy harvester with inter-digital IrO(x) electrode was developed by using silicon bulk micromachining technology. Most PZT cantilever based energy harvesters have utilized platinum electrode material. However, the PZT fatigue characteristics and adhesion/delamination problems caused by the platinum electrode might be serious problem in reliability of energy harvester. To address these problems, the iridium oxide was newly applied. The proposed energy harvester was comprised of bulk micromachined silicon cantilever with 800 x 1000 x 20 microm3, which having a silicon supporting membrane, sol-gel-spin coated Pb(Zr52, Ti48)O3 thin film, and sputtered inter-digitally shaped IrO(x) electrodes, and silicon inertial mass with 1000 x 1000 x 500 microm3 to adjust its resonant frequency. The fabricated energy harvester generated 1 microW of electrical power to 470 komega of load resistance and 1.4 V(peak-to-peak) from a vibration of 0.4 g at 1.475 kHz. The corresponding power density was 6.25 mW x cm(-3) x g(-2). As expected, its electrical failure was significantly improved.

  14. Etching characteristics of Si{110} in 20 wt% KOH with addition of hydroxylamine for the fabrication of bulk micromachined MEMS

    Science.gov (United States)

    Rao, A. V. Narasimha; Swarnalatha, V.; Pal, P.

    2017-12-01

    Anisotropic wet etching is a most widely employed for the fabrication of MEMS/NEMS structures using silicon bulk micromachining. The use of Si{110} in MEMS is inevitable when a microstructure with vertical sidewall is to be fabricated using wet anisotropic etching. In most commonly employed etchants (i.e. TMAH and KOH), potassium hydroxide (KOH) exhibits higher etch rate and provides improved anisotropy between Si{111} and Si{110} planes. In the manufacturing company, high etch rate is demanded to increase the productivity that eventually reduces the cost of end product. In order to modify the etching characteristics of KOH for the micromachining of Si{110}, we have investigated the effect of hydroxylamine (NH2OH) in 20 wt% KOH solution. The concentration of NH2OH is varied from 0 to 20% and the etching is carried out at 75 °C. The etching characteristics which are studied in this work includes the etch rates of Si{110} and silicon dioxide, etched surface morphology, and undercutting at convex corners. The etch rate of Si{110} in 20 wt% KOH + 15% NH2OH solution is measured to be four times more than that of pure 20 wt% KOH. Moreover, the addition of NH2OH increases the undercutting at convex corners and enhances the etch selectivity between Si and SiO2.

  15. Flight Deck Display Technologies for 4DT and Surface Equivalent Visual Operations

    Science.gov (United States)

    Prinzel, Lawrence J., III; Jones, Denis R.; Shelton, Kevin J.; Arthur, Jarvis J., III; Bailey, Randall E.; Allamandola, Angela S.; Foyle, David C.; Hooey, Becky L.

    2009-01-01

    NASA research is focused on flight deck display technologies that may significantly enhance situation awareness, enable new operating concepts, and reduce the potential for incidents/accidents for terminal area and surface operations. The display technologies include surface map, head-up, and head-worn displays; 4DT guidance algorithms; synthetic and enhanced vision technologies; and terminal maneuvering area traffic conflict detection and alerting systems. This work is critical to ensure that the flight deck interface technologies and the role of the human participants can support the full realization of the Next Generation Air Transportation System (NextGen) and its novel operating concepts.

  16. Smoother Sailing Ahead: Integrating Information Technology into the Surface Navy.

    Science.gov (United States)

    1994-09-01

    foreign competition, Ford Motor Company examined many areas of its operations. In its supply procurement division Ford employed over 500 personnel...generating reams of paperwork that contained many inventory discrepancies and billing errors. Mazda Motors in Japan performed the same function better...with five employees. (Schnitt, 1993, p. 19) The competition forced Ford to adopt new methods using modem information technology. Instead of pieces of

  17. Short-pulse-width micromachining of hard materials using DPSS Nd:YAG lasers

    Science.gov (United States)

    Heglin, Michael; Govorkov, Sergei V.; Scaggs, Michael J.; Theoharidis, Haris; Schoelzel, T.

    2002-06-01

    The material processing of an industrial, short-pulse duration DPPS YAG laser producing peak powers greater than 0.2MW is discussed in this paper. This peak power provides sufficient materials processing capability to meet the micro machining needs in the automotive, semiconductor, micro- electronic, medical and telecommunication industries. All hard and soft materials including: plastics, metals, ceramics, diamond and other crystalline materials are suitable candidates for the processing capability of this laser. Micro level features can be machined in these materials to a depth in excess of 1mm with high quality results. In most applications feature sizes can be achieved that are not possible or economical with existing technologies. The optical beam delivery system requirements, and overall micro-machining set-up are also described. The drilling and cutting versatility down to feature sizes of less than 7 micrometers , as well as, complex shapes are shown. The wavelength, pulse length, and peakpower are described and relate to their effect on recast, micro-cracking and material removal rates. Material removal effects related to progressive penetration into the material will be reviewed. The requirements of this DPSS laser technology to meet the operational requirements for high duty cycle operation in industrial environments is covered along with processing flexibility and lower operating cost.

  18. A Micromachined Piezoresistive Pressure Sensor with a Shield Layer

    Science.gov (United States)

    Cao, Gang; Wang, Xiaoping; Xu, Yong; Liu, Sheng

    2016-01-01

    This paper presents a piezoresistive pressure sensor with a shield layer for improved stability. Compared with the conventional piezoresistive pressure sensors, the new one reported in this paper has an n-type shield layer that covers p-type piezoresistors. This shield layer aims to minimize the impact of electrical field and reduce the temperature sensitivity of piezoresistors. The proposed sensors have been successfully fabricated by bulk-micromachining techniques. A sensitivity of 0.022 mV/V/kPa and a maximum non-linearity of 0.085% FS are obtained in a pressure range of 1 MPa. After numerical simulation, the role of the shield layer has been experimentally investigated. It is demonstrated that the shield layer is able to reduce the drift caused by electrical field and ambient temperature variation. PMID:27529254

  19. Heavy ion beam micromachining on LiNbO3

    International Nuclear Information System (INIS)

    Nesprias, F.; Venturino, M.; Debray, M.E.; Davidson, J.; Davidson, M.; Kreiner, A.J.; Minsky, D.; Fischer, M.; Lamagna, A.

    2009-01-01

    In this work 3D micromachining of x-cut lithium niobate crystals was performed using the high energy heavy ion microbeam (HIM) at the Tandar Laboratory, Buenos Aires. The samples were machined using 35 Cl beams at 70 MeV bombarding energy combined with wet etching with hydrofluoric acid solutions at room temperature. As the ion beam penetrates the sample, it induces lattice damage increasing dramatically the local etching rate of the material. This technique was applied to the fabrication of 3D waveguides with long control electrodes. The resulting structures indicate that well defined contours with nearly vertical sidewalls can be made. The results also show that with fluences of only 5 x 10 12 ions/cm 2 , this technique is suitable for the fabrication of different shapes of LiNbO 3 control-waveguides that can be used in different optical devices and matched with the existing optical fibers.

  20. Structural design considerations for micromachined solid-oxide fuel cells

    Science.gov (United States)

    Srikar, V. T.; Turner, Kevin T.; Andrew Ie, Tze Yung; Spearing, S. Mark

    Micromachined solid-oxide fuel cells (μSOFCs) are among a class of devices being investigated for portable power generation. Optimization of the performance and reliability of such devices requires robust, scale-dependent, design methodologies. In this first analysis, we consider the structural design of planar, electrolyte-supported, μSOFCs from the viewpoints of electrochemical performance, mechanical stability and reliability, and thermal behavior. The effect of electrolyte thickness on fuel cell performance is evaluated using a simple analytical model. Design diagrams that account explicitly for thermal and intrinsic residual stresses are presented to identify geometries that are resistant to fracture and buckling. Analysis of energy loss due to in-plane heat conduction highlights the importance of efficient thermal isolation in microscale fuel cell design.

  1. A fully packaged micromachined single crystalline resonant force sensor

    Energy Technology Data Exchange (ETDEWEB)

    Cavalloni, C.; Gnielka, M.; Berg, J. von [Kistler Instrumente AG, Winterthur (Switzerland); Haueis, M.; Dual, J. [ETH Zuerich, Inst. of Mechanical Systems, Zuerich (Switzerland); Buser, R. [Interstate Univ. of Applied Science Buchs, Buchs (Switzerland)

    2001-07-01

    In this work a fully packaged resonant force sensor for static load measurements is presented. The working principle is based on the shift of the resonance frequency in response to the applied load. The heart of the sensor, the resonant structure, is fabricated by micromachining using single crystalline silicon. To avoid creep and hysteresis and to minimize temperature induced stress the resonant structure is encapsulated using an all-in-silicon solution. This means that the load coupling, the excitation of the microresonator and the detection of the oscillation signal are integrated in only one single crystalline silicon chip. The chip is packaged into a specially designed housing made of steel which has been designed with respect to application in harsh environments. The unloaded sensor has an initial frequency of about 22,5 kHz. The sensitivity amounts to 26 Hz/N with a linearity error significantly less than 0,5%FSO. (orig.)

  2. Characterization of bulk-micromachined direct-bonded silicon nanofilters

    Science.gov (United States)

    Tu, Jay K.; Huen, Tony; Szema, Robert; Ferrari, Mauro

    1998-03-01

    The ability to separate 30-100 nm particles - nanofiltration - is critical for many biomedical applications. Where this filtration needs to be absolute, such as for viral elimination in the blood fractionation process, the large variations in pore size found with conventional polymeric filters can lead to the unwanted presence of viruses in the filtrate. To overcome this problem, we have developed a filter with micromachined channels sandwiched between two bonded silicon wafers. These channels are formed through the selective deposition and then removal of a thermally-grown oxide, the thickness of which can be controlled to +/- 4 percent for 30 nm pores. In this paper, we will present both the gas and liquid characterization, and the filtration studies done on 44 and 100 nm beads.

  3. 3D capacitive tactile sensor using DRIE micromachining

    Science.gov (United States)

    Chuang, Chiehtang; Chen, Rongshun

    2005-07-01

    This paper presents a three dimensional micro capacitive tactile sensor that can detect normal and shear forces which is fabricated using deep reactive ion etching (DRIE) bulk silicon micromachining. The tactile sensor consists of a force transmission plate, a symmetric suspension system, and comb electrodes. The sensing character is based on the changes of capacitance between coplanar sense electrodes. High sensitivity is achieved by using the high aspect ratio interdigital electrodes with narrow comb gaps and large overlap areas. The symmetric suspension mechanism of this sensor can easily solve the coupling problem of measurement and increase the stability of the structure. In this paper, the sensor structure is designed, the capacitance variation of the proposed device is theoretically analyzed, and the finite element analysis of mechanical behavior of the structures is performed.

  4. Fabrication of Microhotplates Based on Laser Micromachining of Zirconium Oxide

    Science.gov (United States)

    Oblov, Konstantin; Ivanova, Anastasia; Soloviev, Sergey; Samotaev, Nikolay; Lipilin, Alexandr; Vasiliev, Alexey; Sokolov, Andrey

    We present a novel approach to the fabrication of MEMS devices, which can be used for gas sensors operating in harsh environment in wireless and autonomous information systems. MEMS platforms based on ZrO2/Y2O3 (YSZ) are applied in these devices. The methods of ceramic MEMS devices fabrication with laser micromachining are considered. It is shown that the application of YSZ membranes permits a decrease in MEMS power consumption at 4500C down to ∼75 mW at continuous heating and down to ∼ 1 mW at pulse heating mode. The application of the platforms is not restricted by gas sensors: they can be used for fast thermometers, bolometric matrices, flowmeteres and other MEMS devices working under harsh environmental conditions.

  5. The application of confocal technology based on polycapillary X-ray optics in surface topography

    International Nuclear Information System (INIS)

    Zhao, Guangcui; Sun, Tianxi; Liu, Zhiguo; Yuan, Hao; Li, Yude; Liu, Hehe; Zhao, Weigang; Zhang, Ruixia; Min, Qin; Peng, Song

    2013-01-01

    A confocal micro-X-ray fluorescence (MXRF) technology based on polycapillary X-ray optics was proposed for determining surface topography. This confocal topography method involves elemental sensitivity and can be used to classify the objects according to their elemental composition while obtaining their surface topography. To improve the spatial resolution of this confocal topography technology, the center of the confocal micro-volume was overlapped with the output focal spot of the polycapillary X-ray, focusing the lens in the excitation channel. The input focal spot of the X-ray lens parallel to the detection channel was used to determine the surface position of the sample. The corresponding surface adaptive algorithm was designed to obtain the surface topography. The surface topography of a ceramic chip was obtained. This confocal MXRF surface topography method could find application in the materials sciences

  6. Feasibility study of flexible phased array ultrasonic technology using irregular surface specimen

    International Nuclear Information System (INIS)

    Lee, Seung Pyo; Moon, Yong Sik; Jung, Nam Du

    2015-01-01

    Nuclear power plant contain many dissimilar metal welds that connect carbon steel components with stainless steel pipes using alloy 600 welding materials. Primary water stress corrosion cracks at dissimilar metal welds have been continuously reported around the world. In periodic integrity evaluations, dissimilar metal welds are examined using a generic ultrasonic testing procedure, KPD-UT-10. In this procedure, the gap between the probe and examination surface is limited to 1/32 inch (0.8 mm). It is not easy to test some dissimilar metal welds in Korean plants applying ordinary technology because of their tapered shapes and irregular surface conditions. This paper introduces a method for applying a flexible phased array technology to improve the reliability of ultrasonic testing results for various shapes and surface conditions. The artificial flaws in specimens with irregular surfaces were completely detected using the flexible phased array ultrasonic technology. Therefore, it can be said that the technology is applicable to field examination.

  7. Feasibility study of flexible phased array ultrasonic technology using irregular surface specimen

    Energy Technology Data Exchange (ETDEWEB)

    Lee, Seung Pyo; Moon, Yong Sik; Jung, Nam Du [NDE Performance Demonstration Team, Korea Hydro and Nuclear Power, Central Research Institute, Daejeon (Korea, Republic of)

    2015-02-15

    Nuclear power plant contain many dissimilar metal welds that connect carbon steel components with stainless steel pipes using alloy 600 welding materials. Primary water stress corrosion cracks at dissimilar metal welds have been continuously reported around the world. In periodic integrity evaluations, dissimilar metal welds are examined using a generic ultrasonic testing procedure, KPD-UT-10. In this procedure, the gap between the probe and examination surface is limited to 1/32 inch (0.8 mm). It is not easy to test some dissimilar metal welds in Korean plants applying ordinary technology because of their tapered shapes and irregular surface conditions. This paper introduces a method for applying a flexible phased array technology to improve the reliability of ultrasonic testing results for various shapes and surface conditions. The artificial flaws in specimens with irregular surfaces were completely detected using the flexible phased array ultrasonic technology. Therefore, it can be said that the technology is applicable to field examination.

  8. Acidic deposition: State of science and technology. Report 15. Liming acidic surface waters. Final report

    International Nuclear Information System (INIS)

    Olem, H.; Thornelof, E.; Sandoy, S.; Schreiber, R.K.

    1990-09-01

    The document describes the science and technology of aquatic liming--a method for improving the water quality of acidic surface waters to restore or enhance fisheries. The report is a comprehensive compilation of years of research in North America and Europe by dozens of scientists. Several mitigation technologies--including those that have only been proposed--are critically evaluated along with the effects of liming on water chemistry and aquatic biota. Through these evaluations, the state of the science and technology of aquatic liming is identified for the reader. Whole-lake liming is now recognized as a valuable management tool for acidic surface waters and their fisheries. However, some liming technologies are considered experimental and will need further evaluation. Distinctions between technologies are included--as is the distinction between liming acidic surface waters and reducing acidifying emissions

  9. Study of surfactant-added TMAH for applications in DRIE and wet etching-based micromachining

    Science.gov (United States)

    Tang, B.; Shikida, M.; Sato, K.; Pal, P.; Amakawa, H.; Hida, H.; Fukuzawa, K.

    2010-06-01

    In this paper, etching anisotropy is evaluated for a number of different crystallographic orientations of silicon in a 0.1 vol% Triton-X-100 added 25 wt% tetramethylammonium hydroxide (TMAH) solution using a silicon hemisphere. The research is primarily aimed at developing advanced applications of wet etching in microelectromechanical systems (MEMS). The etching process is carried out at different temperatures in the range of 61-81 °C. The etching results of silicon hemisphere and different shapes of three-dimensional structures in {1 0 0}- and {1 1 0}-Si surfaces are analyzed. Significantly important anisotropy, different from a traditional etchant (e.g. pure KOH and TMAH), is investigated to extend the applications of the wet etching process in silicon bulk micromachining. The similar etching behavior of exact and vicinal {1 1 0} and {1 1 1} planes in TMAH + Triton is utilized selectively to remove the scalloping from deep reactive-ion etching (DRIE) etched profiles. The direct application of the present research is demonstrated by fabricating a cylindrical lens with highly smooth etched surface finish. The smoothness of a micro-lens at different locations is measured qualitatively by a scanning electron microscope and quantitatively by an atomic force microscope. The present paper provides a simple and effective fabrication method of the silicon micro-lens for optical MEMS applications.

  10. An electro-magnetic micromachined actuator monolithically integrated with a vertical shutter for variable optical attenuation

    International Nuclear Information System (INIS)

    Hung, Shao Hsuan; Hsieh, Hsin-Ta; John Su, Guo-Dung

    2008-01-01

    The design, fabrication and test results of an electromagnetic-actuated micromachined variable optical attenuator (VOA) are reported in this paper. Optical attenuation is achieved by moving a shutter into the light path between a pair of single mode fiber collimators. The shutter, consisting of a 500 µm × 1200 µm vertical micromirror, is monolithically integrated with an actuation flap. The micromirror was made by tetra-methyl ammonium hydroxide (TMAH) anisotropic wet etching with a sharp edge and a smooth reflecting surface. By arranging fiber collimators in different configurations, the reported VOA can be used as either normally-on or normally-off modes due to its relatively large shutter surface. The insertion loss of the VOA is 0.2 dB and 0.4 dB for normally-on and normally-off modes, respectively. Both optical and mechanical simulation models of the device were discussed, and the theoretical calculations based on these models offered an efficient way to predict the performance of the shutter-type VOA. The controllable attenuation range is approximately 40 dB with a driving voltage less than 0.5 V, and the driving power is less than 2 mW. A response time of 5 ms is achieved by applying proper driving waveform

  11. ECONOMIC INDICATORS OF ROAD SURFACES RECONSTRUCTIONS IN THE WORLD USING NON-WASTE TECHNOLOGY

    Directory of Open Access Journals (Sweden)

    Dilyara Kyazymovna Izmaylova

    2017-05-01

    Full Text Available The article describes the cost formation of restoration of road surfaces using the methods of replacing and processing the damaged layers. There is a mathematical model of cost of the one unit of production including the cost of building materials with delivery. The estimation of the total cost of repairs in the variable amount using the technology of full replacement of the surface and processing technology of the 50% of the material on the site.

  12. Efficacy of liquid and foam decontamination technologies for chemical warfare agents on indoor surfaces.

    Science.gov (United States)

    Love, Adam H; Bailey, Christopher G; Hanna, M Leslie; Hok, Saphon; Vu, Alex K; Reutter, Dennis J; Raber, Ellen

    2011-11-30

    Bench-scale testing was used to evaluate the efficacy of four decontamination formulations on typical indoor surfaces following exposure to the liquid chemical warfare agents sarin (GB), soman (GD), sulfur mustard (HD), and VX. Residual surface contamination on coupons was periodically measured for up to 24h after applying one of four selected decontamination technologies [0.5% bleach solution with trisodium phosphate, Allen Vanguard Surface Decontamination Foam (SDF™), U.S. military Decon Green™, and Modec Inc. and EnviroFoam Technologies Sandia Decontamination Foam (DF-200)]. All decontamination technologies tested, except for the bleach solution, performed well on nonporous and nonpermeable glass and stainless-steel surfaces. However, chemical agent residual contamination typically remained on porous and permeable surfaces, especially for the more persistent agents, HD and VX. Solvent-based Decon Green™ performed better than aqueous-based bleach or foams on polymeric surfaces, possibly because the solvent is able to penetrate the polymer matrix. Bleach and foams out-performed Decon Green for penetrating the highly polar concrete surface. Results suggest that the different characteristics needed for an ideal and universal decontamination technology may be incompatible in a single formulation and a strategy for decontaminating a complex facility will require a range of technologies. Copyright © 2011 Elsevier B.V. All rights reserved.

  13. Hydrophobic and superhydrophobic surfaces fabricated using atmospheric pressure cold plasma technology: A review.

    Science.gov (United States)

    Dimitrakellis, Panagiotis; Gogolides, Evangelos

    2018-04-01

    Hydrophobic surfaces are often used to reduce wetting of surfaces by water. In particular, superhydrophobic surfaces are highly desired for several applications due to their exceptional properties such as self-cleaning, anti-icing, anti-friction and others. Such surfaces can be prepared via numerous methods including plasma technology, a dry technique with low environmental impact. Atmospheric pressure plasma (APP) has recently attracted significant attention as lower-cost alternative to low-pressure plasmas, and as a candidate for continuous rather than batch processing. Although there are many reviews on water-repellent surfaces, and a few reviews on APP technology, there are hardly any review works on APP processing for hydrophobic and superhydrohobic surface fabrication, a topic of high importance in nanotechnology and interface science. Herein, we critically review the advances on hydrophobic and superhydrophobic surface fabrication using APP technology, trying also to give some perspectives in the field. After a short introduction to superhydrophobicity of nanostructured surfaces and to APPs we focus this review on three different aspects: (1) The atmospheric plasma reactor technology used for fabrication of (super)hydrophobic surfaces. (2) The APP process for hydrophobic surface preparation. The hydrophobic surface preparation processes are categorized methodologically as: a) activation, b) grafting, c) polymerization, d) roughening and hydrophobization. Each category includes subcategories related to different precursors used. (3) One of the most important sections of this review concerns superhydrophobic surfaces fabricated using APP. These are methodologically characterized as follows: a) single step processes where micro-nano textured topography and low surface energy coating are created at the same time, or b) multiple step processes, where these steps occur sequentially in or out of the plasma. We end the review with some perspectives in the field. We

  14. Evaluation of Coating Removal and Aggressive Surface Removal Surface Technologies Applied to Concrete Walls, Brick Walls, and Concrete Ceilings

    Energy Technology Data Exchange (ETDEWEB)

    Lagos, L.E.; Ebadian, M.A.

    1997-11-01

    The purpose of this investigation was to test and evaluate innovative and commercially available technologies for the surface decontamination of walls and ceilings. This investigation supports the DOE's objectives of reducing risks to human health and the environment through its restoration projects at FEMP and MEMP. This project was performed at the Hemispheric Center for Environmental Technology (HCET) at Florida International University (FIU), where one innovative and four commercially available decontamination technologies were evaluated under standard, non-nuclear testing conditions. The performance data generated by this project will assist DOE site managers in the selection of the safest, most efficient, and most cost-effective decontamination technologies to accomplish their remediation objectives.

  15. Functional properties of bio-inspired surfaces: characterization and technological applications

    National Research Council Canada - National Science Library

    Favret, Eduardo A; Fuentes, Néstor O

    2009-01-01

    ... technological materials. It analyses how such surfaces can be described and characterized using microscopic techniques and thus reproduced, encompassing the important areas of current surface replication techniques and the associated acquisition of good master structures. It is well known that biological systems have the ability to sense, ...

  16. Topochip: technology for instructing cell fate and morphology via designed surface topography

    NARCIS (Netherlands)

    Hulshof, G.F.B.

    2016-01-01

    The control of biomaterial surface topography is emerging as a tool to influence cells and tissues. Due to a lack a theoretical framework of the underlying molecular mechanisms, high-throughput screening (HTS) technology is valuable to identify and study bioactive surface topographies. To identify

  17. Surface reconstruction and deformation monitoring of stratospheric airship based on laser scanning technology

    Science.gov (United States)

    Guo, Kai; Xie, Yongjie; Ye, Hu; Zhang, Song; Li, Yunfei

    2018-04-01

    Due to the uncertainty of stratospheric airship's shape and the security problem caused by the uncertainty, surface reconstruction and surface deformation monitoring of airship was conducted based on laser scanning technology and a √3-subdivision scheme based on Shepard interpolation was developed. Then, comparison was conducted between our subdivision scheme and the original √3-subdivision scheme. The result shows our subdivision scheme could reduce the shrinkage of surface and the number of narrow triangles. In addition, our subdivision scheme could keep the sharp features. So, surface reconstruction and surface deformation monitoring of airship could be conducted precisely by our subdivision scheme.

  18. Cell Surface and Membrane Engineering: Emerging Technologies and Applications

    Directory of Open Access Journals (Sweden)

    Christopher T. Saeui

    2015-06-01

    Full Text Available Membranes constitute the interface between the basic unit of life—a single cell—and the outside environment and thus in many ways comprise the ultimate “functional biomaterial”. To perform the many and often conflicting functions required in this role, for example to partition intracellular contents from the outside environment while maintaining rapid intake of nutrients and efflux of waste products, biological membranes have evolved tremendous complexity and versatility. This article describes how membranes, mainly in the context of living cells, are increasingly being manipulated for practical purposes with drug discovery, biofuels, and biosensors providing specific, illustrative examples. Attention is also given to biology-inspired, but completely synthetic, membrane-based technologies that are being enabled by emerging methods such as bio-3D printers. The diverse set of applications covered in this article are intended to illustrate how these versatile technologies—as they rapidly mature—hold tremendous promise to benefit human health in numerous ways ranging from the development of new medicines to sensitive and cost-effective environmental monitoring for pathogens and pollutants to replacing hydrocarbon-based fossil fuels.

  19. Cell Surface and Membrane Engineering: Emerging Technologies and Applications

    Science.gov (United States)

    Saeui, Christopher T.; Mathew, Mohit P.; Liu, Lingshui; Urias, Esteban; Yarema, Kevin J.

    2015-01-01

    Membranes constitute the interface between the basic unit of life—a single cell—and the outside environment and thus in many ways comprise the ultimate “functional biomaterial”. To perform the many and often conflicting functions required in this role, for example to partition intracellular contents from the outside environment while maintaining rapid intake of nutrients and efflux of waste products, biological membranes have evolved tremendous complexity and versatility. This article describes how membranes, mainly in the context of living cells, are increasingly being manipulated for practical purposes with drug discovery, biofuels, and biosensors providing specific, illustrative examples. Attention is also given to biology-inspired, but completely synthetic, membrane-based technologies that are being enabled by emerging methods such as bio-3D printers. The diverse set of applications covered in this article are intended to illustrate how these versatile technologies—as they rapidly mature—hold tremendous promise to benefit human health in numerous ways ranging from the development of new medicines to sensitive and cost-effective environmental monitoring for pathogens and pollutants to replacing hydrocarbon-based fossil fuels. PMID:26096148

  20. Technology of magnetic abrasive finishing in machining of difficult-to-machine alloy complex surface

    Directory of Open Access Journals (Sweden)

    Fujian MA

    2016-10-01

    Full Text Available The technology of magnetic abrasive finishing is one of the important finishing technologies. Combining with low-frequency vibration and ultrasonic vibration, it can attain higher precision, quality and efficiency. The characteristics and the related current research of magnetic abrasive finishing, vibration assisted magnetic abrasive finishing and ultrasonic assisted magnetic abrasive finishing are introduced. According to the characteristics of the difficult-to-machine alloy's complex surface, the important problems for further study are presented to realize the finishing of complex surface with the technology of magnetic abrasive finishing, such as increasing the machining efficiency by enhancing the magnetic flux density of machining gap and compounding of magnetic energy and others, establishing of the control function during machining and the process planning method for magnetic abrasive finishing of complex surface under the space geometry restraint of complex surface on magnetic pole, etc.

  1. To study the effect of different electrolytes and their concentrations on electrochemical micromachining

    Science.gov (United States)

    Singh, Ramandeep

    2018-04-01

    The machining of materials on micro-meter and sub-micrometre is considered the technology of future. Due to challenging applications of biomedical and aerospace industries, the traditional manufacturing techniques lacks in dimensional accuracy. Thus for such industries, the technique that can control micron tolerances is Electrochemical Micromachining (EMM). Hard metals and alloys can also be machined by this technique. Thus to develop a novel EMM system setup and to investigate the effect of three different electrolytes i.e NaCl, NaNO3 and HCl with their different concentrations, the current study was conducted. Stainless Steel-304 and copper were chosen as the work piece material in the present study. Taguchi L18 orthogonal array was used for the best combination of experiment. According to the present investigation most prominent factor affecting the material removal (MR) comes out was electrolyte. HCl provides the better MR among other electrolytes i.e. NaNO3 and NaCl. The amount of MR increased with the increase in the concentration of electrolyte.

  2. Advanced surface technology a holistic view on the extensive and intertwined world of applied surface engineering

    CERN Document Server

    Moller, Per

    2013-01-01

    These two volumes serve as an inclusive and practical reference in manufacturing as well as a comprehensive text for university-level course work. Before delving into the variety of conventional and emerging surface finishing processes available to the 21st century practitioner, the authors cover the principles behind the processes, including wear and other mechanical properties, corrosion and electrochemistry. Throughout, the material also covers testing, property measurement and a generic introduction to basically all surface relevant characterization techniques, keyed to the specific process and application under discussion.

  3. Microfabrication in free-standing gallium nitride using UV laser micromachining

    International Nuclear Information System (INIS)

    Gu, E.; Howard, H.; Conneely, A.; O'Connor, G.M.; Illy, E.K.; Knowles, M.R.H.; Edwards, P.R.; Martin, R.W.; Watson, I.M.; Dawson, M.D.

    2006-01-01

    Gallium nitride (GaN) and related alloys are important semiconductor materials for fabricating novel photonic devices such as ultraviolet (UV) light-emitting diodes (LEDs) and vertical cavity surface-emitting lasers (VCSELs). Recent technical advances have made free-standing GaN substrates available and affordable. However, these materials are strongly resistant to wet chemical etching and also, low etch rates restrict the use of dry etching. Thus, to develop alternative high-resolution processing for these materials is increasingly important. In this paper, we report the fabrication of microstructures in free-standing GaN using pulsed UV lasers. An effective method was first developed to remove the re-deposited materials due to the laser machining. In order to achieve controllable machining and high resolution in GaN, machining parameters were carefully optimised. Under the optimised conditions, precision features such as holes (through holes, blind or tapered holes) on a tens of micrometer length scale have been machined. To fabricate micro-trenches in GaN with vertical sidewalls and a flat bottom, different process strategies of laser machining were tested and optimised. Using this technique, we have successfully fabricated high-quality micro-trenches in free-standing GaN with various widths and depths. The approach combining UV laser micromachining and other processes is also discussed. Our results demonstrate that the pulsed UV laser is a powerful tool for fabricating precision microstructures and devices in gallium nitride

  4. Hypersonic force measurements using internal balance based on optical micromachined Fabry-Perot interferometry

    Science.gov (United States)

    Qiu, Huacheng; Min, Fu; Zhong, Shaolong; Song, Xin; Yang, Yanguang

    2018-03-01

    Force measurements using wind tunnel balance are necessary for determining a variety of aerodynamic performance parameters, while the harsh environment in hypersonic flows requires that the measurement instrument should be reliable and robust, in against strong electromagnetic interference, high vacuum, or metal (oxide) dusts. In this paper, we demonstrated a three-component internal balance for hypersonic aerodynamic force measurements, using novel optical micromachined Fabry-Perot interferometric (FPI) strain gauges as sensing elements. The FPI gauges were fabricated using Micro-Opto-Electro-Mechanical Systems (MOEMS) surface and bulk fabrication techniques. High-reflectivity coatings are used to form a high-finesse Fabry-Perot cavity, which benefits a high resolution. Antireflective and passivation coatings are used to reduce unwanted interferences. The FPI strain gauge based balance has been calibrated and evaluated in a Mach 5 hypersonic flow. The results are compared with the traditional technique using the foil resistive strain gauge balance, indicating that the proposed balance based on the MOEMS FPI strain gauge is reliable and robust and is potentially suitable for the hypersonic wind tunnel harsh environment.

  5. UV laser micromachining of piezoelectric ceramic using a pulsed Nd:YAG laser

    International Nuclear Information System (INIS)

    Zeng, D.W.; Xie, C.S.; Li, K.; Chan, H.L.W.; Choy, C.L.; Yung, K.C.

    2004-01-01

    UV laser (λ=355 nm) ablation of piezoelectric lead zirconate titanate (PZT) ceramics in air has been investigated under different laser parameters. It has been found that there is a critical pulse number (N=750). When the pulse number is smaller than the critical value, the ablation rate decreases with increasing pulse number. Beyond the critical value, the ablation rate becomes constant. The ablation rate and concentrations of O, Zr and Ti on the ablated surface increase with the laser fluence, while the Pb concentration decreases due to the selective evaporation of PbO. The loss of the Pb results in the formation of a metastable pyrochlore phase. ZrO 2 was detected by XPS in the ablated zone. Also, the concentrations of the pyrochlore phase and ZrO 2 increase with increasing laser fluence. These results clearly indicate that the chemical composition and phase structure in the ablated zone strongly depend on the laser fluence. The piezoelectric properties of the cut PZT ceramic samples completely disappear due to the loss of the Pb and the existence of the pyrochlore phase. After these samples were annealed at 1150 C for 1 h in a PbO-controlled atmosphere, their phase structure and piezoelectric properties were recovered again. Finally, 1-3 and concentric-ring 2-2 PZT/epoxy composites were fabricated by UV laser micromachining and their thickness modes were measured by impedance spectrum analysis and a d 33 meter. Both composites show high piezoelectric properties. (orig.)

  6. Planar Indium Tin Oxide Heater for Improved Thermal Distribution for Metal Oxide Micromachined Gas Sensors

    Directory of Open Access Journals (Sweden)

    M. Cihan Çakır

    2016-09-01

    Full Text Available Metal oxide gas sensors with integrated micro-hotplate structures are widely used in the industry and they are still being investigated and developed. Metal oxide gas sensors have the advantage of being sensitive to a wide range of organic and inorganic volatile compounds, although they lack selectivity. To introduce selectivity, the operating temperature of a single sensor is swept, and the measurements are fed to a discriminating algorithm. The efficiency of those data processing methods strongly depends on temperature uniformity across the active area of the sensor. To achieve this, hot plate structures with complex resistor geometries have been designed and additional heat-spreading structures have been introduced. In this work we designed and fabricated a metal oxide gas sensor integrated with a simple square planar indium tin oxide (ITO heating element, by using conventional micromachining and thin-film deposition techniques. Power consumption–dependent surface temperature measurements were performed. A 420 °C working temperature was achieved at 120 mW power consumption. Temperature distribution uniformity was measured and a 17 °C difference between the hottest and the coldest points of the sensor at an operating temperature of 290 °C was achieved. Transient heat-up and cool-down cycle durations are measured as 40 ms and 20 ms, respectively.

  7. Planar Indium Tin Oxide Heater for Improved Thermal Distribution for Metal Oxide Micromachined Gas Sensors.

    Science.gov (United States)

    Çakır, M Cihan; Çalışkan, Deniz; Bütün, Bayram; Özbay, Ekmel

    2016-09-29

    Metal oxide gas sensors with integrated micro-hotplate structures are widely used in the industry and they are still being investigated and developed. Metal oxide gas sensors have the advantage of being sensitive to a wide range of organic and inorganic volatile compounds, although they lack selectivity. To introduce selectivity, the operating temperature of a single sensor is swept, and the measurements are fed to a discriminating algorithm. The efficiency of those data processing methods strongly depends on temperature uniformity across the active area of the sensor. To achieve this, hot plate structures with complex resistor geometries have been designed and additional heat-spreading structures have been introduced. In this work we designed and fabricated a metal oxide gas sensor integrated with a simple square planar indium tin oxide (ITO) heating element, by using conventional micromachining and thin-film deposition techniques. Power consumption-dependent surface temperature measurements were performed. A 420 °C working temperature was achieved at 120 mW power consumption. Temperature distribution uniformity was measured and a 17 °C difference between the hottest and the coldest points of the sensor at an operating temperature of 290 °C was achieved. Transient heat-up and cool-down cycle durations are measured as 40 ms and 20 ms, respectively.

  8. The monocular visual imaging technology model applied in the airport surface surveillance

    Science.gov (United States)

    Qin, Zhe; Wang, Jian; Huang, Chao

    2013-08-01

    At present, the civil aviation airports use the surface surveillance radar monitoring and positioning systems to monitor the aircrafts, vehicles and the other moving objects. Surface surveillance radars can cover most of the airport scenes, but because of the terminals, covered bridges and other buildings geometry, surface surveillance radar systems inevitably have some small segment blind spots. This paper presents a monocular vision imaging technology model for airport surface surveillance, achieving the perception of scenes of moving objects such as aircrafts, vehicles and personnel location. This new model provides an important complement for airport surface surveillance, which is different from the traditional surface surveillance radar techniques. Such technique not only provides clear objects activities screen for the ATC, but also provides image recognition and positioning of moving targets in this area. Thereby it can improve the work efficiency of the airport operations and avoid the conflict between the aircrafts and vehicles. This paper first introduces the monocular visual imaging technology model applied in the airport surface surveillance and then the monocular vision measurement accuracy analysis of the model. The monocular visual imaging technology model is simple, low cost, and highly efficient. It is an advanced monitoring technique which can make up blind spot area of the surface surveillance radar monitoring and positioning systems.

  9. Comprehensive investigation of the corrosion and surface chemical effects of the decontamination technologies

    International Nuclear Information System (INIS)

    Szabo-Nagy, Andrea; Varga, Kalman; Deak-Horvath, Emese; Nemeth, Zoltan; Horvath, David; Schunk, Janos; Patek, Gabor

    2012-09-01

    Decontamination technologies are mainly developed to reduce the collective dose of the maintenance personnel at NPPs. The highest efficiency (i.e., the highest DF values) available without detrimental modification of the treated surface of structural material is the most important goal in the course of the application of a decontamination technology. A so-called 'soft' chemical decontamination technology has been developed - supported by the Paks Nuclear Power Plant - at the Institute of Radiochemistry and Radioecology of the University of Pannonia. The novel base technology can be effectively applied for the decontamination of the heat exchanger tubes of steam generators. In addition, by optimizing the main technological parameters (temperature, concentration of the liquid chemicals, flow rates, contact time, etc.) it can be utilized for specific applications such as decontamination of some dismountable devices and separable equipment or the total decontamination prior to plant dismantling (decommissioning) in the future. The aim of this work is to compare the efficiency, corrosion and surface chemical effects of some improved versions of the novel base-technology elaborated for decontamination of austenitic stainless steel surfaces. The experiments have been performed at laboratory conditions in decontamination model systems. The applied methods: γ-spectrometry, ICP-OES, voltammetry and SEM-EDX. The experimental results revealed that the efficiency of the base-technology mainly depends on the surface features of the stainless steel samples such as the chemical composition and thickness of the oxide layer, the nature (quantity, morphology and chemical composition) of the crystalline deposits. It has been documented that the improved version of the base-technology are suitable for the decontamination of both steel surfaces covered by chemically resistant large Cr-content crystals and that having compact oxide-layers (up to a thickness of 10

  10. Technology of surface wastewater purification, including high-rise construction areas

    Science.gov (United States)

    Tsyba, Anna; Skolubovich, Yury

    2018-03-01

    Despite on the improvements in the quality of high-rise construction areas and industrial wastewater treatment, the pollution of water bodies continues to increase. This is due to the organized and unorganized surface untreated sewage entry into the reservoirs. The qualitative analysis of some cities' surface sewage composition is carried out in the work. Based on the published literature review, the characteristic contamination present in surface wastewater was identified. The paper proposes a new technology for the treatment of surface sewage and presents the results of preliminary studies.

  11. CO2-laser micromachining and back-end processing for rapid production of PMMA-based microfluidic systems

    DEFF Research Database (Denmark)

    Klank, Henning; Kutter, Jörg Peter; Geschke, Oliver

    2002-01-01

    , a three-layer polymer microstructure with included optical fibers was fabricated within two days. The use of CO2-laser systems to produce microfluidic systems has not been published before. These systems provide a cost effective alternative to UV-laser systems and they are especially useful......In this article, we focus on the enormous potential of a CO2-laser system for rapidly producing polymer microfluidic structures. The dependence was assessed of the depth and width of laser-cut channels on the laser beam power and on the number of passes of the beam along the same channel...... for microstructured PMMA [poly( methyl methacrylate)] parts were investigated, such as solvent-assisted glueing, melting, laminating and surface activation using a plasma asher. A solvent-assisted thermal bonding method proved to be the most time-efficient one. Using laser micromachining together with bonding...

  12. New and Emerging Technologies for Real-Time Air and Surface Beryllium Monitoring

    Energy Technology Data Exchange (ETDEWEB)

    Phifer, B.E. Jr.; Churnetski, E.L.; Cooke, L.E.; Reed, J.J.; Howell, M.L.; Smith, V.D.

    2001-09-01

    In this study, five emerging technologies were identified for real-time monitoring of airborne beryllium: Microwave-Induced Plasma Spectroscopy (MIPS), Aerosol Beam-Focused Laser-Induced Plasma Spectroscopy (ABFLIPS), Laser-Induced Breakdown Spectroscopy (LIBS), Surfaced-Enhanced Raman Scattering (SERS) Spectroscopy, and Micro-Calorimetric Spectroscopy (CalSpec). Desired features of real-time air beryllium monitoring instrumentation were developed from the Y-12 CBDPP. These features were used as guidelines for the identification of potential technologies as well as their unique demonstrated capability to provide real-time monitoring of similar materials. However, best available technologies were considered, regardless of their ability to comply with the desired features. None of the five technologies have the capability to measure the particle size of airborne beryllium. Although reducing the total concentration of airborne beryllium is important, current literature suggests that reducing or eliminating the concentration of respirable beryllium is critical for worker health protection. Eight emerging technologies were identified for surface monitoring of beryllium. CalSpec, MIPS, SERS, LIBS, Laser Ablation, Absorptive Stripping Voltametry (ASV), Modified Inductively Coupled Plasma (ICP) Spectroscopy, and Gamma BeAST. Desired features of real-time surface beryllium monitoring were developed from the Y-12 CBDPP. These features were used as guidelines for the identification of potential technologies. However, the best available technologies were considered regardless of their ability to comply with the desired features.

  13. Review of piezoelectric micromachined ultrasonic transducers and their applications

    International Nuclear Information System (INIS)

    Jung, Joontaek; Lee, Wonjun; Kang, Woojin; Shin, Eunjung; Choi, Hongsoo; Ryu, Jungho

    2017-01-01

    In recent decades, micromachined ultrasonic transducers (MUTs) have been investigated as an alternative to conventional piezocomposite ultrasonic transducers, primarily due to the advantages that microelectromechanical systems provide. Miniaturized ultrasonic systems require ultrasonic transducers integrated with complementary metal-oxide-semiconductor circuits. Hence, piezoelectric MUTs (pMUTs) and capacitive MUTs (cMUTs) have been developed as the most favorable solutions. This paper reviews the basic equations to understand the characteristics of thin-film-based piezoelectric devices and presents recent research on pMUTs, including current approaches and limitations. Methods to improve the coupling coefficient of pMUTs are also investigated, such as device structure, materials, and fabrication techniques. The device structure improvements include multielectrode pMUTs, partially clamped boundary conditions, and 3D pMUTs (curved and domed types), where the latter can provide an electromechanical coupling coefficient of up to 45%. The piezoelectric coefficient ( e 31 ) can be increased by controlling the crystal texture (seed layer of γ -Al 2 O 3 ), using single-crystal (PMN-PT) materials, or control of residual stresses (using SiO 2 layer). Arrays of pMUTs can be implemented for various applications including intravascular ultrasound, fingerprint sensors, rangefinders in air, and wireless power supply systems. pMUTs are expected to be an ideal solution for applications such as mobile biometric security (fingerprint sensors) and rangefinders due to their superior power efficiency and compact size. (topical review)

  14. Micromachined force sensors using thin film nickel–chromium piezoresistors

    International Nuclear Information System (INIS)

    Nadvi, Gaviraj S; Butler, Donald P; Çelik-Butler, Zeynep; Gönenli, İsmail Erkin

    2012-01-01

    Micromachined force/tactile sensors using nickel–chromium piezoresistors have been investigated experimentally and through finite-element analysis. The force sensors were designed with a suspended aluminum oxide (Al 2 O 3 ) membrane and optimally placed piezoresistors to measure the strain in the membrane when deflected with an applied force. Different devices, each with varying size and shape of both the membrane and the piezoresistors, were designed, fabricated and characterized. The piezoresistors were placed into a half-Wheatstone bridge configuration with two active and two passive nickel–chromium resistors to provide temperature drift compensation. The force sensors were characterized using a load cell and a nanopositioner to measure the sensor response with applied load. Piezoresistive gauge factors in the range of 1–5.2 have been calculated for the thin film nichrome (NiCr 80/20 wt%) from the measured results. The force sensors were calculated to have a noise equivalent force of 65–245 nN. (paper)

  15. Generation of programmable temporal pulse shape and applications in micromachining

    Science.gov (United States)

    Peng, X.; Jordens, B.; Hooper, A.; Baird, B. W.; Ren, W.; Xu, L.; Sun, L.

    2009-02-01

    In this paper we presented a pulse shaping technique on regular solid-state lasers and the application in semiconductor micromachining. With a conventional Q-switched laser, all of the parameters can be adjusted over only limited ranges, especially the pulse width and pulse shape. However, some laser link processes using traditional laser pulses with pulse widths of a few nanoseconds to a few tens of nanoseconds tend to over-crater in thicker overlying passivation layers and thereby cause IC reliability problems. Use of a laser pulse with a special shape and a fast leading edge, such as tailored pulse, is one technique for controlling link processing. The pulse shaping technique is based on light-loop controlled optical modulation to shape conventional Q-switched solid-state lasers. One advantage of the pulse shaping technique is to provide a tailored pulse shape that can be programmed to have more than one amplitude value. Moreover, it has the capability of providing programmable tailored pulse shapes with discrete amplitude and time duration components. In addition, it provides fast rising and fall time of each pulse at fairly high repetition rate at 355nm with good beam quality. The regular-to-shaped efficiency is up to 50%. We conclude with a discussion of current results for laser processing of semiconductor memory link structures using programmable temporal pulse shapes. The processing experiments showed promising results with shaped pulse.

  16. Manufacture of Radio Frequency Micromachined Switches with Annealing

    Directory of Open Access Journals (Sweden)

    Cheng-Yang Lin

    2014-01-01

    Full Text Available The fabrication and characterization of a radio frequency (RF micromachined switch with annealing were presented. The structure of the RF switch consists of a membrane, coplanar waveguide (CPW lines, and eight springs. The RF switch is manufactured using the complementary metal oxide semiconductor (CMOS process. The switch requires a post-process to release the membrane and springs. The post-process uses a wet etching to remove the sacrificial silicon dioxide layer, and to obtain the suspended structures of the switch. In order to improve the residual stress of the switch, an annealing process is applied to the switch, and the membrane obtains an excellent flatness. The finite element method (FEM software CoventorWare is utilized to simulate the stress and displacement of the RF switch. Experimental results show that the RF switch has an insertion loss of 0.9 dB at 35 GHz and an isolation of 21 dB at 39 GHz. The actuation voltage of the switch is 14 V.

  17. Manufacture of radio frequency micromachined switches with annealing.

    Science.gov (United States)

    Lin, Cheng-Yang; Dai, Ching-Liang

    2014-01-17

    The fabrication and characterization of a radio frequency (RF) micromachined switch with annealing were presented. The structure of the RF switch consists of a membrane, coplanar waveguide (CPW) lines, and eight springs. The RF switch is manufactured using the complementary metal oxide semiconductor (CMOS) process. The switch requires a post-process to release the membrane and springs. The post-process uses a wet etching to remove the sacrificial silicon dioxide layer, and to obtain the suspended structures of the switch. In order to improve the residual stress of the switch, an annealing process is applied to the switch, and the membrane obtains an excellent flatness. The finite element method (FEM) software CoventorWare is utilized to simulate the stress and displacement of the RF switch. Experimental results show that the RF switch has an insertion loss of 0.9 dB at 35 GHz and an isolation of 21 dB at 39 GHz. The actuation voltage of the switch is 14 V.

  18. Giant flexoelectric polarization in a micromachined ferroelectric diaphragm

    KAUST Repository

    Wang, Zhihong

    2012-08-14

    The coupling between dielectric polarization and strain gradient, known as flexoelectricity, becomes significantly large on the micro- and nanoscale. Here, it is shown that giant flexoelectric polarization can reverse remnant ferroelectric polarization in a bent Pb(Zr0.52Ti0.48) O3 (PZT) diaphragm fabricated by micromachining. The polarization induced by the strain gradient and the switching behaviors of the polarization in response to an external electric field are investigated by observing the electromechanical coupling of the diaphragm. The method allows determination of the absolute zero polarization state in a PZT film, which is impossible using other existing methods. Based on the observation of the absolute zero polarization state and the assumption that bending of the diaphragm is the only source of the self-polarization, the upper bound of flexoelectric coefficient of PZT film is calculated to be as large as 2.0 × 10-4 C m -1. The strain gradient induced by bending the diaphragm is measured to be on the order of 102 m-1, three orders of magnitude larger than that obtained in the bulk material. Because of this large strain gradient, the estimated giant flexoelectric polarization in the bent diaphragm is on the same order of magnitude as the normal remnant ferroelectric polarization of PZT film. Copyright © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

  19. Receive-Noise Analysis of Capacitive Micromachined Ultrasonic Transducers.

    Science.gov (United States)

    Bozkurt, Ayhan; Yaralioglu, G Goksenin

    2016-11-01

    This paper presents an analysis of thermal (Johnson) noise received from the radiation medium by otherwise noiseless capacitive micromachined ultrasonic transducer (CMUT) membranes operating in their fundamental resonance mode. Determination of thermal noise received by multiple numbers of transducers or a transducer array requires the assessment of cross-coupling through the radiation medium, as well as the self-radiation impedance of the individual transducer. We show that the total thermal noise received by the cells of a CMUT has insignificant correlation, and is independent of the radiation impedance, but is only determined by the mass of each membrane and the electromechanical transformer ratio. The proof is based on the analytical derivations for a simple transducer with two cells, and extended to transducers with numerous cells using circuit simulators. We used a first-order model, which incorporates the fundamental resonance of the CMUT. Noise power is calculated by integrating over the entire spectrum; hence, the presented figures are an upper bound for the noise. The presented analyses are valid for a transimpedance amplifier in the receive path. We use the analysis results to calculate the minimum detectable pressure of a CMUT. We also provide an analysis based on the experimental data to show that output noise power is limited by and comparable to the theoretical upper limit.

  20. A Micromachined Infrared Senor for an Infrared Focal Plane Array

    Directory of Open Access Journals (Sweden)

    Seong M. Cho

    2008-04-01

    Full Text Available A micromachined infrared sensor for an infrared focal plane array has been designed and fabricated. Amorphous silicon was used as a sensing material, and silicon nitride was used as a membrane material. To get a good absorption in infrared range, the sensor structure was designed as a l/4 cavity structure. A Ni-Cr film was selected as an electrode material and mixed etching scheme was applied in the patterning process of the Ni-Cr electrode. All the processes were made in 0.5 μm iMEMS fabricated in the Electronics and Telecommunication Research Institute (ETRI. The processed MEMS sensor had a small membrane deflection less than 0.15 μm. This small deflection can be attributed to the rigorous balancing of the stresses of individual layers. The efficiency of infrared absorption was more than 75% in the wavelength range of 8 ~ 14 μm. The processed infrared sensor showed high responsivity of ~230 kV/W at 1.0V bias and 2 Hz operation condition. The time constant of the sensor was 8.6 msec, which means that the sensor is suitable to be operated in 30 Hz frame rate.

  1. Review of piezoelectric micromachined ultrasonic transducers and their applications

    Science.gov (United States)

    Jung, Joontaek; Lee, Wonjun; Kang, Woojin; Shin, Eunjung; Ryu, Jungho; Choi, Hongsoo

    2017-11-01

    In recent decades, micromachined ultrasonic transducers (MUTs) have been investigated as an alternative to conventional piezocomposite ultrasonic transducers, primarily due to the advantages that microelectromechanical systems provide. Miniaturized ultrasonic systems require ultrasonic transducers integrated with complementary metal-oxide-semiconductor circuits. Hence, piezoelectric MUTs (pMUTs) and capacitive MUTs (cMUTs) have been developed as the most favorable solutions. This paper reviews the basic equations to understand the characteristics of thin-film-based piezoelectric devices and presents recent research on pMUTs, including current approaches and limitations. Methods to improve the coupling coefficient of pMUTs are also investigated, such as device structure, materials, and fabrication techniques. The device structure improvements include multielectrode pMUTs, partially clamped boundary conditions, and 3D pMUTs (curved and domed types), where the latter can provide an electromechanical coupling coefficient of up to 45%. The piezoelectric coefficient (e 31) can be increased by controlling the crystal texture (seed layer of γ-Al2O3), using single-crystal (PMN-PT) materials, or control of residual stresses (using SiO2 layer). Arrays of pMUTs can be implemented for various applications including intravascular ultrasound, fingerprint sensors, rangefinders in air, and wireless power supply systems. pMUTs are expected to be an ideal solution for applications such as mobile biometric security (fingerprint sensors) and rangefinders due to their superior power efficiency and compact size.

  2. Current Options for Measuring the Surface Temperature of Dairy Cattle in a Stable Technology: Review

    Directory of Open Access Journals (Sweden)

    Kateřina Švejdová

    2016-05-01

    Full Text Available Regular measurement of the body surface temperature can help to assess the health status of animals. There are many technological possibilities of contactless temperature measurement of body surface. The important thing is to find the right part of the body whose temperature will point to the first possible symptoms and immediately react to the first signs of the disease. Disagreements about how to measure body surface temperature and accuracy of the method can occur when different measures are used. We review work showing possibilities of contactless surface temperature measurements using 1 thermography, 2 electronic transponders and 3 other possibilities of measuring the body surface temperature of dairy cattle. For example, when we scan the surface temperature with the thermal imager there can operate in individual animals confounding factors such as the nature or degree of muscular coat, which may significantly affect the results.

  3. Surface technology is essential for transition to a hydrogen-based energy system

    DEFF Research Database (Denmark)

    Nielsen, L. P.; Leisner, P.; Møller, P.

    2018-01-01

    The importance of advanced surface technology for the success of the ongoing energy turnaround in Germany has recently been discussed in this journal. The purpose of the present article is to add views based on the conditions valid for the Nordic region.......The importance of advanced surface technology for the success of the ongoing energy turnaround in Germany has recently been discussed in this journal. The purpose of the present article is to add views based on the conditions valid for the Nordic region....

  4. [Application Progress of Three-dimensional Laser Scanning Technology in Medical Surface Mapping].

    Science.gov (United States)

    Zhang, Yonghong; Hou, He; Han, Yuchuan; Wang, Ning; Zhang, Ying; Zhu, Xianfeng; Wang, Mingshi

    2016-04-01

    The booming three-dimensional laser scanning technology can efficiently and effectively get spatial three-dimensional coordinates of the detected object surface and reconstruct the image at high speed,high precision and large capacity of information.Non-radiation,non-contact and the ability of visualization make it increasingly popular in three-dimensional surface medical mapping.This paper reviews the applications and developments of three-dimensional laser scanning technology in medical field,especially in stomatology,plastic surgery and orthopedics.Furthermore,the paper also discusses the application prospects in the future as well as the biomedical engineering problems it would encounter with.

  5. Modern technologies for improving cleaning and disinfection of environmental surfaces in hospitals

    Directory of Open Access Journals (Sweden)

    John M. Boyce

    2016-04-01

    Full Text Available Abstract Experts agree that careful cleaning and disinfection of environmental surfaces are essential elements of effective infection prevention programs. However, traditional manual cleaning and disinfection practices in hospitals are often suboptimal. This is often due in part to a variety of personnel issues that many Environmental Services departments encounter. Failure to follow manufacturer’s recommendations for disinfectant use and lack of antimicrobial activity of some disinfectants against healthcare-associated pathogens may also affect the efficacy of disinfection practices. Improved hydrogen peroxide-based liquid surface disinfectants and a combination product containing peracetic acid and hydrogen peroxide are effective alternatives to disinfectants currently in widespread use, and electrolyzed water (hypochlorous acid and cold atmospheric pressure plasma show potential for use in hospitals. Creating “self-disinfecting” surfaces by coating medical equipment with metals such as copper or silver, or applying liquid compounds that have persistent antimicrobial activity surfaces are additional strategies that require further investigation. Newer “no-touch” (automated decontamination technologies include aerosol and vaporized hydrogen peroxide, mobile devices that emit continuous ultraviolet (UV-C light, a pulsed-xenon UV light system, and use of high-intensity narrow-spectrum (405 nm light. These “no-touch” technologies have been shown to reduce bacterial contamination of surfaces. A micro-condensation hydrogen peroxide system has been associated in multiple studies with reductions in healthcare-associated colonization or infection, while there is more limited evidence of infection reduction by the pulsed-xenon system. A recently completed prospective, randomized controlled trial of continuous UV-C light should help determine the extent to which this technology can reduce healthcare-associated colonization and infections

  6. Modern technologies for improving cleaning and disinfection of environmental surfaces in hospitals.

    Science.gov (United States)

    Boyce, John M

    2016-01-01

    Experts agree that careful cleaning and disinfection of environmental surfaces are essential elements of effective infection prevention programs. However, traditional manual cleaning and disinfection practices in hospitals are often suboptimal. This is often due in part to a variety of personnel issues that many Environmental Services departments encounter. Failure to follow manufacturer's recommendations for disinfectant use and lack of antimicrobial activity of some disinfectants against healthcare-associated pathogens may also affect the efficacy of disinfection practices. Improved hydrogen peroxide-based liquid surface disinfectants and a combination product containing peracetic acid and hydrogen peroxide are effective alternatives to disinfectants currently in widespread use, and electrolyzed water (hypochlorous acid) and cold atmospheric pressure plasma show potential for use in hospitals. Creating "self-disinfecting" surfaces by coating medical equipment with metals such as copper or silver, or applying liquid compounds that have persistent antimicrobial activity surfaces are additional strategies that require further investigation. Newer "no-touch" (automated) decontamination technologies include aerosol and vaporized hydrogen peroxide, mobile devices that emit continuous ultraviolet (UV-C) light, a pulsed-xenon UV light system, and use of high-intensity narrow-spectrum (405 nm) light. These "no-touch" technologies have been shown to reduce bacterial contamination of surfaces. A micro-condensation hydrogen peroxide system has been associated in multiple studies with reductions in healthcare-associated colonization or infection, while there is more limited evidence of infection reduction by the pulsed-xenon system. A recently completed prospective, randomized controlled trial of continuous UV-C light should help determine the extent to which this technology can reduce healthcare-associated colonization and infections. In conclusion, continued efforts to

  7. Proton beam micromachining on strippable aqueous base developable negative resist

    International Nuclear Information System (INIS)

    Rajta, I.; Uzonyi, I.; Baradacs, E.; Chatzichristidi, M.; Raptis, I.; Valamontes, E.S.

    2004-01-01

    Complete text of publication follows. Proton Beam Micromachining (PBM, also known as P-beam writing), a novel direct- write process for the production of 3D microstructures, can be used to make multilevel structures in a single layer of resist by varying the ion energy. The interaction between the bombarding ions and the target material is mainly ionization, and very few ions suffer high angle nuclear collisions, therefore structures made with PBM have smooth near vertical side walls. The most commony applied resists in PBM are the positive, conventional, polymethyl methacrylate (PMMA); and the negative, chemically amplified, SU-8 (Micro Chem Corp). SU-8 is an epoxy based resist suitable also for LIGA and UV-LIGA processes, it offers good sensitivity, good process latitude, very high aspect ratio and therefore it dominates in the high aspect ratio micromachining applications. SU-8 requires 30 nC/mm 2 fluence for PBM irradiations at 2 MeV protons. Its crosslinking chemistry is based on the eight epoxy rings in the polymer chain, which provide a very dense three dimensional network in the presence of suitably activated photo acid generators (PAGs) which is very difficult to be stripped away after development. Thus, stripping has to be assisted with plasma processes or with special liquid removers. Moreover, the SU-8 developer is organic, propylene glycol methyl ether acetate (PGMEA), and thus environmentally non-friendly. To overcome the SU-8 stripping limitations, design of a negative resist system where solubility change is not based solely on cross- linking but also on the differentiation of hydrophilicity between exposed and non-exposed areas is desirable. A new resist formulation, fulfilling the above specifications has been developed recently [1]. This formulation is based on a specific grade epoxy novolac (EP) polymer, a partially hydrogenated poly-4-hydroxy styrene (PHS) polymer, and an onium salt as photoacid generator (PAG), and has been successfully

  8. Geometry Laboratory (GEOLAB) surface modeling and grid generation technology and services

    Science.gov (United States)

    Kerr, Patricia A.; Smith, Robert E.; Posenau, Mary-Anne K.

    1995-01-01

    The facilities and services of the GEOmetry LABoratory (GEOLAB) at the NASA Langley Research Center are described. Included in this description are the laboratory functions, the surface modeling and grid generation technologies used in the laboratory, and examples of the tasks performed in the laboratory.

  9. Technology development for metallic hot structures in aerodynamic control surfaces of reusable launchers

    NARCIS (Netherlands)

    Sudmeijer, K.J.; Wentzel, C.; Lefeber, B.M.; Kloosterman, A.

    2002-01-01

    In this paper a summary is presented of the technology development in the Netherlands focussed on the design and development of a metallic aerodynamic control surface for the future European reusable launcher. The applied materials are mainly Oxide Dispersion Strengthened (ODS) alloys produced by

  10. Intracardiac ultrasound scanner using a micromachine (MEMS) actuator.

    Science.gov (United States)

    Zara, J M; Bobbio, S M; Goodwin-Johansson, S; Smith, S W

    2000-01-01

    Catheter-based intracardiac ultrasound offers the potential for improved guidance of interventional cardiac procedures. The objective of this research is the development of catheter-based mechanical sector scanners incorporating high frequency ultrasound transducers operating at frequencies up to 20 MHz. The authors' current transducer assembly consists of a single 1.75 mm by 1.75 mm, 20 MHz, PZT element mounted on a 2 mm by 2 mm square, 75 mum thick polyimide table that pivots on 3-mum thick gold plated polyimide hinges. The hinges also serve as the electrical connections to the transducer. This table-mounted transducer is tilted using a miniature linear actuator to produce a sector scan. This linear actuator is an integrated force array (IFA), which is an example of a micromachine, i.e., a microelectromechanical system (MEMS). The IFA is a thin (2.2 mum) polyimide membrane, which consists of a network of hundreds of thousands of micron scale deformable capacitors made from pairs of metallized polyimide plates. IFAs contract with an applied voltage of 30-120 V and have been shown to produce strains as large as 20% and forces of up to 8 dynes. The prototype transducer and actuator assembly was fabricated and interfaced with a GagePCI analog to digital conversion board digitizing 12 bit samples at a rate of 100 MSamples/second housed in a personal computer to create a single channel ultrasound scanner. The deflection of the table transducer in a low viscosity insulating fluid (HFE 7100, 3M) is up to +/-10 degrees at scan rates of 10-60 Hz. Software has been developed to produce real-time sector scans on the PC monitor.

  11. Chemical vapor detection using a capacitive micromachined ultrasonic transducer.

    Science.gov (United States)

    Lee, Hyunjoo J; Park, Kwan Kyu; Kupnik, Mario; Oralkan, O; Khuri-Yakub, Butrus T

    2011-12-15

    Distributed sensing of gas-phase chemicals using highly sensitive and inexpensive sensors is of great interest for many defense and consumer applications. In this paper we present ppb-level detection of dimethyl methylphosphonate (DMMP), a common simulant for sarin gas, with a ppt-level resolution using an improved capacitive micromachined ultrasonic transducer (CMUT) as a resonant chemical sensor. The improved CMUT operates at a higher resonant frequency of 47.7 MHz and offers an improved mass sensitivity of 48.8 zg/Hz/μm(2) by a factor of 2.7 compared to the previous CMUT sensors developed. A low-noise oscillator using the CMUT resonant sensor as the frequency-selective device was developed for real-time sensing, which exhibits an Allan deviation of 1.65 Hz (3σ) in the presence of a gas flow; this translates into a mass resolution of 80.5 zg/μm(2). The CMUT resonant sensor is functionalized with a 50-nm thick DKAP polymer developed at Sandia National Laboratory for dimethyl methylphosphonate (DMMP) detection. To demonstrate ppb-level detection of the improved chemical sensor system, the sensor performance was tested at a certified lab (MIT Lincoln Laboratory), which is equipped with an experimental chemical setup that reliably and accurately delivers a wide range of low concentrations down to 10 ppb. We report a high volume sensitivity of 34.5 ± 0.79 pptv/Hz to DMMP and a good selectivity of the polymer to DMMP with respect to dodecane and 1-octanol.

  12. Micromachined microphone array on a chip for turbulent boundary layer measurements

    Science.gov (United States)

    Krause, Joshua Steven

    A surface micromachined microphone array on a single chip has been successfully designed, fabricated, characterized, and tested for aeroacoustic purposes. The microphone was designed to have venting through the diaphragm, 64 elements (8x8) on the chip, and used a capacitive transduction scheme. The microphone was fabricated using the MEMSCAP PolyMUMPs process (a foundry polysilicon surface micromachining process) along with facilities at Tufts Micro and Nano Fabrication Facility (TMNF) where a Parylene-C passivation layer deposition and release of the microstructures were performed. The devices are packaged with low profile interconnects, presenting a maximum of 100 mum of surface topology. The design of an individual microphone was completed through the use of a lumped element model (LEM) to determine the theoretical performance of the microphone. Off-chip electronics were created to allow the microphone array outputs to be redirected to one of two channels, allowing dynamic reconfiguration of the effective transducer shape in software and provide 80 dB off isolation. The characterization was completed through the use of laser Doppler vibrometry (LDV), acoustic plane wave tube and free-field calibration, and electrical noise floor testing in a Faraday cage. Measured microphone sensitivity is 0.15 mV/Pa for an individual microphone and 8.7 mV/Pa for the entire array, in close agreement with model predictions. The microphones and electronics operate over the 200--40 000 Hz band. The dynamic range extends from 60 dB SPL in a 1 Hz band to greater than 150 dB SPL. Element variability was +/-0.05 mV/Pa in sensitivity with an array yield of 95%. Wind tunnel testing at flow rates of up to 205.8 m/s indicates that the devices continue to operate in flow without damage, and can be successfully reconfigured on the fly. Care has been taken to systematically remove contaminating signals (acoustic, vibration, and noise floor) from the wind tunnel data to determine actual

  13. New technique for fabrication of high frequency piezoelectric Micromachined Ultrasound Transducers

    DEFF Research Database (Denmark)

    Pedersen, T; Thomsen, Erik Vilain; Zawada, T

    2008-01-01

    A novel technique for fabrication of linear arrays of high frequency piezoelectric Micromachined Ultrasound Transducers (pMUT) on silicon substrates is presented. Piezoelectric elements are formed by deposition of PZT ((PbZrxTi1-x)O3) into etched features of the silicon substrate such that the de......A novel technique for fabrication of linear arrays of high frequency piezoelectric Micromachined Ultrasound Transducers (pMUT) on silicon substrates is presented. Piezoelectric elements are formed by deposition of PZT ((PbZrxTi1-x)O3) into etched features of the silicon substrate...

  14. Development of micro capacitive accelerometer for subsurface microseismic measurement; Micromachining ni yoru chika danseiha kenshutsu no tame no silicon yoryogata kasokudo sensor no seisaku

    Energy Technology Data Exchange (ETDEWEB)

    Nishizawa, M; Niitsuma, H; Esashi, M [Tohoku University, Sendai (Japan). Faculty of Engineering

    1997-05-27

    A silicon capacitive accelerometer was fabricated to detect subsurface elastic waves by using micromachining technology. Characteristics required for it call for capability of detecting acceleration with amplitudes from 0.1 to 1 gal and flat amplitude characteristics in frequency bands of 10 Hz to several kHz. For the purpose of measuring transition phenomena, linear phase characteristics in the required bands must be guaranteed, cross sensitivity must be small, and resistance to water, pressure and heat is demanded. Sensitivity of the sensor is determined finally by noise level in a detection circuit. The sensor`s minimum detection capability was 40 mgal in the case of the distance between a weight and an electrode being 3 {mu}m. This specification value is a value realizable by the current micromachining technology. Dimensions for the weight and other members were decided with the natural frequency to make band width 2 kHz set to 4 kHz. Completion of the product has not been achieved yet, however, because of a problem that the weight gets stuck on the electrode plate in anode bonding in the assembly process. 7 refs., 5 figs., 1 tab.

  15. Deterministic ion beam material adding technology for high-precision optical surfaces.

    Science.gov (United States)

    Liao, Wenlin; Dai, Yifan; Xie, Xuhui; Zhou, Lin

    2013-02-20

    Although ion beam figuring (IBF) provides a highly deterministic method for the precision figuring of optical components, several problems still need to be addressed, such as the limited correcting capability for mid-to-high spatial frequency surface errors and low machining efficiency for pit defects on surfaces. We propose a figuring method named deterministic ion beam material adding (IBA) technology to solve those problems in IBF. The current deterministic optical figuring mechanism, which is dedicated to removing local protuberances on optical surfaces, is enriched and developed by the IBA technology. Compared with IBF, this method can realize the uniform convergence of surface errors, where the particle transferring effect generated in the IBA process can effectively correct the mid-to-high spatial frequency errors. In addition, IBA can rapidly correct the pit defects on the surface and greatly improve the machining efficiency of the figuring process. The verification experiments are accomplished on our experimental installation to validate the feasibility of the IBA method. First, a fused silica sample with a rectangular pit defect is figured by using IBA. Through two iterations within only 47.5 min, this highly steep pit is effectively corrected, and the surface error is improved from the original 24.69 nm root mean square (RMS) to the final 3.68 nm RMS. Then another experiment is carried out to demonstrate the correcting capability of IBA for mid-to-high spatial frequency surface errors, and the final results indicate that the surface accuracy and surface quality can be simultaneously improved.

  16. Modeling, Fabrication and Testing of a Customizable Micromachined Hotplate for Sensor Applications.

    Science.gov (United States)

    Tommasi, Alessio; Cocuzza, Matteo; Perrone, Denis; Pirri, Candido Fabrizio; Mosca, Roberto; Villani, Marco; Delmonte, Nicola; Zappettini, Andrea; Calestani, Davide; Marasso, Simone Luigi

    2016-12-30

    In the sensors field the active sensing material frequently needs a controlled temperature in order to work properly. In microsystems technology, micro-machined hotplates represent a platform consisting of a thin suspended membrane where the sensing material can be deposited, usually integrating electrical stimuli and temperature readout. The micro-hotplate ensures a series of advantages such as miniaturized size, fast response, high sensitivity, low power consumption and selectivity for chemical sensing. This work compares the coplanar and the buried approach for the micro-hotplate heaters design with the aim to optimize the fabrication process and to propose a guideline for the choice of the suitable design with respect to the applications. In particular, robust Finite Element Method (FEM) models are set up in order to predict the electrical and thermal behavior of the micro-hotplates. The multiphysics approach used for the simulation allows to match as close as possible the actual device to the predictive model: geometries, materials, physics have been carefully linked to the fabricated devices to obtain the best possible accuracy. The materials involved in the fabrication process are accurately selected in order to improve the yield of the process and the performance of the devices. The fabricated micro-hotplates are able to warm the active region up to 400 °C (with a corresponding power consumption equal to 250 mW @ 400 °C) with a uniform temperature distribution in the buried micro-hotplate and a controlled temperature gradient in the coplanar one. A response time of about 70 ms was obtained on the virtual model, which perfectly agrees with the one measured on the fabricated device. Besides morphological, electrical and thermal characterizations, this work includes reliability tests in static and dynamic modes.

  17. Modeling, Fabrication and Testing of a Customizable Micromachined Hotplate for Sensor Applications

    Directory of Open Access Journals (Sweden)

    Alessio Tommasi

    2016-12-01

    Full Text Available In the sensors field the active sensing material frequently needs a controlled temperature in order to work properly. In microsystems technology, micro-machined hotplates represent a platform consisting of a thin suspended membrane where the sensing material can be deposited, usually integrating electrical stimuli and temperature readout. The micro-hotplate ensures a series of advantages such as miniaturized size, fast response, high sensitivity, low power consumption and selectivity for chemical sensing. This work compares the coplanar and the buried approach for the micro-hotplate heaters design with the aim to optimize the fabrication process and to propose a guideline for the choice of the suitable design with respect to the applications. In particular, robust Finite Element Method (FEM models are set up in order to predict the electrical and thermal behavior of the micro-hotplates. The multiphysics approach used for the simulation allows to match as close as possible the actual device to the predictive model: geometries, materials, physics have been carefully linked to the fabricated devices to obtain the best possible accuracy. The materials involved in the fabrication process are accurately selected in order to improve the yield of the process and the performance of the devices. The fabricated micro-hotplates are able to warm the active region up to 400 °C (with a corresponding power consumption equal to 250 mW @ 400 °C with a uniform temperature distribution in the buried micro-hotplate and a controlled temperature gradient in the coplanar one. A response time of about 70 ms was obtained on the virtual model, which perfectly agrees with the one measured on the fabricated device. Besides morphological, electrical and thermal characterizations, this work includes reliability tests in static and dynamic modes.

  18. An overview of technologies for immobilization of enzymes and surface analysis techniques for immobilized enzymes

    Science.gov (United States)

    Mohamad, Nur Royhaila; Marzuki, Nur Haziqah Che; Buang, Nor Aziah; Huyop, Fahrul; Wahab, Roswanira Abdul

    2015-01-01

    The current demands of sustainable green methodologies have increased the use of enzymatic technology in industrial processes. Employment of enzyme as biocatalysts offers the benefits of mild reaction conditions, biodegradability and catalytic efficiency. The harsh conditions of industrial processes, however, increase propensity of enzyme destabilization, shortening their industrial lifespan. Consequently, the technology of enzyme immobilization provides an effective means to circumvent these concerns by enhancing enzyme catalytic properties and also simplify downstream processing and improve operational stability. There are several techniques used to immobilize the enzymes onto supports which range from reversible physical adsorption and ionic linkages, to the irreversible stable covalent bonds. Such techniques produce immobilized enzymes of varying stability due to changes in the surface microenvironment and degree of multipoint attachment. Hence, it is mandatory to obtain information about the structure of the enzyme protein following interaction with the support surface as well as interactions of the enzymes with other proteins. Characterization technologies at the nanoscale level to study enzymes immobilized on surfaces are crucial to obtain valuable qualitative and quantitative information, including morphological visualization of the immobilized enzymes. These technologies are pertinent to assess efficacy of an immobilization technique and development of future enzyme immobilization strategies. PMID:26019635

  19. A top-crossover-to-bottom addressed segmented annular array using piezoelectric micromachined ultrasonic transducers

    Science.gov (United States)

    Jung, Joontaek; Lee, Wonjun; Kang, Woojin; Hong, Hyeryung; Yuen Song, Hi; Oh, Inn-yeal; Park, Chul Soon; Choi, Hongsoo

    2015-11-01

    We design and fabricate segmented annular arrays (SAAs) using piezoelectric micromachined ultrasonic transducers (pMUTs) to demonstrate the feasibility of acoustic focusing of ultrasound. The fabricated SAAs have 25 concentric top-electrode signal lines and eight bottom-electrodes for grounding to enable electronic steering of selectively grouped ultrasonic transducers from 2393 pMUT elements. Each element in the array is connected by top-crossover-to-bottom metal bridges, which reduce the parasitic capacitance. Circular-shaped pMUT elements, 120 μm in diameter, are fabricated using 1 μm-thick sol-gel lead zirconate titanate on a silicon wafer. To utilize the high-density pMUT array, a deep reactive ion etching process is used for anisotropic silicon etching to realize the transducer membranes. The resonant frequency and effective coupling coefficient of the elements, measured with an impedance analyzer, yields 1.517 MHz and 1.29%, respectively, in air. The SAAs using pMUTs are packaged on a printed circuit board and coated with parylene C for acoustic intensity measurements in water. The ultrasound generated by each segmented array is focused on a selected point in space. When a 5 Vpp, 1.5 MHz square wave is applied, the maximum spatial peak temporal average intensity ({{I}\\text{spta}} ) is found to be 79 mW cm-2 5 mm from the SAAs’ surface without beamforming. The beam widths (-3 dB) of ultrasonic radiation patterns in the elevation and azimuth directions are recorded as 3 and 3.4 mm, respectively. The results successfully show the feasibility of focusing ultrasound on a small area with SAAs using pMUTs.

  20. Fabrication and characterization of a micromachined swirl-shaped ionic polymer metal composite actuator with electrodes exhibiting asymmetric resistance.

    Science.gov (United States)

    Feng, Guo-Hua; Liu, Kim-Min

    2014-05-12

    This paper presents a swirl-shaped microfeatured ionic polymer-metal composite (IPMC) actuator. A novel micromachining process was developed to fabricate an array of IPMC actuators on a glass substrate and to ensure that no shortcircuits occur between the electrodes of the actuator. We demonstrated a microfluidic scheme in which surface tension was used to construct swirl-shaped planar IPMC devices of microfeature size and investigated the flow velocity of Nafion solutions, which formed the backbone polymer of the actuator, within the microchannel. The unique fabrication process yielded top and bottom electrodes that exhibited asymmetric surface resistance. A tool for measuring surface resistance was developed and used to characterize the resistances of the electrodes for the fabricated IPMC device. The actuator, which featured asymmetric electrode resistance, caused a nonzero-bias current when the device was driven using a zero-bias square wave, and we propose a circuit model to describe this phenomenon. Moreover, we discovered and characterized a bending and rotating motion when the IPMC actuator was driven using a square wave. We observed a strain rate of 14.6% and a displacement of 700 μm in the direction perpendicular to the electrode surfaces during 4.5-V actuation.

  1. Capability assessment and challenges for quantum technology gravity sensors for near surface terrestrial geophysical surveying

    Science.gov (United States)

    Boddice, Daniel; Metje, Nicole; Tuckwell, George

    2017-11-01

    Geophysical surveying is widely used for the location of subsurface features. Current technology is limited in terms of its resolution (thus size of features it can detect) and penetration depth and a suitable technique is needed to bridge the gap between shallow near surface investigation using techniques such as EM conductivity mapping and GPR commonly used to map the upper 5 m below ground surface, and large features at greater depths detectable using conventional microgravity (> 5 m below ground surface). This will minimise the risks from unknown features buried in and conditions of the ground during civil engineering work. Quantum technology (QT) gravity sensors potentially offer a step-change in technology for locating features which lie outside of the currently detectable range in terms of size and depth, but that potential is currently unknown as field instruments have not been developed. To overcome this, a novel computer simulation was developed for a large range of different targets of interest. The simulation included realistic noise modelling of instrumental, environmental and location sources of noise which limit the accuracy of current microgravity measurements, in order to assess the potential capability of the new QT instruments in realistic situations and determine some of the likely limitations on their implementation. The results of the simulations for near surface features showed that the new technology is best employed in a gradiometer configuration as opposed to the traditional single sensor gravimeter used by current instruments due to the ability to suppress vibrational environmental noise effects due to common mode rejection between the sensors. A significant improvement in detection capability of 1.5-2 times was observed, putting targets such as mineshafts into the detectability zone which would be a major advantage for subsurface surveying. Thus this research, for the first time, has demonstrated clearly the benefits of QT gravity

  2. Surface biofunctionalization and production of miniaturized sensor structures using aerosol printing technologies

    International Nuclear Information System (INIS)

    Grunwald, Ingo; Groth, Esther; Wirth, Ingo; Schumacher, Julian; Maiwald, Marcus; Zoellmer, Volker; Busse, Matthias

    2010-01-01

    The work described in this paper demonstrates that very small protein and DNA structures can be applied to various substrates without denaturation using aerosol printing technology. This technology allows high-resolution deposition of various nanoscaled metal and biological suspensions. Before printing, metal and biological suspensions were formulated and then nebulized to form an aerosol which is aerodynamically focused on the printing module of the system in order to achieve precise structuring of the nanoscale material on a substrate. In this way, it is possible to focus the aerosol stream at a distance of about 5 mm from the printhead to the surface. This technology is useful for printing fluorescence-marked proteins and printing enzymes without affecting their biological activity. Furthermore, higher molecular weight DNA can be printed without shearing. The advantages, such as printing on complex, non-planar 3D structured surfaces, and disadvantages of the aerosol printing technology are also discussed and are compared with other printing technologies. In addition, miniaturized sensor structures with line thicknesses in the range of a few micrometers are fabricated by applying a silver sensor structure to glass. After sintering using an integrated laser or in an oven process, electrical conductivity is achieved within the sensor structure. Finally, we printed BSA in small micrometre-sized areas within the sensor structure using the same deposition system. The aerosol printing technology combined with material development offers great advantages for future-oriented applications involving biological surface functionalization on small areas. This is important for innovative biomedical micro-device development and for production solutions which bridge the disciplines of biology and electronics.

  3. Surface biofunctionalization and production of miniaturized sensor structures using aerosol printing technologies.

    Science.gov (United States)

    Grunwald, Ingo; Groth, Esther; Wirth, Ingo; Schumacher, Julian; Maiwald, Marcus; Zoellmer, Volker; Busse, Matthias

    2010-03-01

    The work described in this paper demonstrates that very small protein and DNA structures can be applied to various substrates without denaturation using aerosol printing technology. This technology allows high-resolution deposition of various nanoscaled metal and biological suspensions. Before printing, metal and biological suspensions were formulated and then nebulized to form an aerosol which is aerodynamically focused on the printing module of the system in order to achieve precise structuring of the nanoscale material on a substrate. In this way, it is possible to focus the aerosol stream at a distance of about 5 mm from the printhead to the surface. This technology is useful for printing fluorescence-marked proteins and printing enzymes without affecting their biological activity. Furthermore, higher molecular weight DNA can be printed without shearing. The advantages, such as printing on complex, non-planar 3D structured surfaces, and disadvantages of the aerosol printing technology are also discussed and are compared with other printing technologies. In addition, miniaturized sensor structures with line thicknesses in the range of a few micrometers are fabricated by applying a silver sensor structure to glass. After sintering using an integrated laser or in an oven process, electrical conductivity is achieved within the sensor structure. Finally, we printed BSA in small micrometre-sized areas within the sensor structure using the same deposition system. The aerosol printing technology combined with material development offers great advantages for future-oriented applications involving biological surface functionalization on small areas. This is important for innovative biomedical micro-device development and for production solutions which bridge the disciplines of biology and electronics.

  4. Surface biofunctionalization and production of miniaturized sensor structures using aerosol printing technologies

    Energy Technology Data Exchange (ETDEWEB)

    Grunwald, Ingo; Groth, Esther; Wirth, Ingo; Schumacher, Julian; Maiwald, Marcus; Zoellmer, Volker; Busse, Matthias, E-mail: ingo.wirth@ifam.frauhofer.d [Fraunhofer Institute for Manufacturing Technology and Applied Materials Research (IFAM), Wiener Strasse 12, 28359 Bremen (Germany)

    2010-03-15

    The work described in this paper demonstrates that very small protein and DNA structures can be applied to various substrates without denaturation using aerosol printing technology. This technology allows high-resolution deposition of various nanoscaled metal and biological suspensions. Before printing, metal and biological suspensions were formulated and then nebulized to form an aerosol which is aerodynamically focused on the printing module of the system in order to achieve precise structuring of the nanoscale material on a substrate. In this way, it is possible to focus the aerosol stream at a distance of about 5 mm from the printhead to the surface. This technology is useful for printing fluorescence-marked proteins and printing enzymes without affecting their biological activity. Furthermore, higher molecular weight DNA can be printed without shearing. The advantages, such as printing on complex, non-planar 3D structured surfaces, and disadvantages of the aerosol printing technology are also discussed and are compared with other printing technologies. In addition, miniaturized sensor structures with line thicknesses in the range of a few micrometers are fabricated by applying a silver sensor structure to glass. After sintering using an integrated laser or in an oven process, electrical conductivity is achieved within the sensor structure. Finally, we printed BSA in small micrometre-sized areas within the sensor structure using the same deposition system. The aerosol printing technology combined with material development offers great advantages for future-oriented applications involving biological surface functionalization on small areas. This is important for innovative biomedical micro-device development and for production solutions which bridge the disciplines of biology and electronics.

  5. Surface electromagnetic technology for the external inspection of oil and gas pipelines

    Energy Technology Data Exchange (ETDEWEB)

    Mousatov, A.; Nakamura, E.; Delgado, O.; Flores, A. [Mexican Petroleum Institute, Mexico City (Mexico); Nakamura, E. [Moscow State University, Moscow (Russian Federation); Shevnin, V. [Moscow State University (Russian Federation)

    2009-07-01

    In this paper we present a surface electromagnetic technology for the non-destructive pipeline coating inspection (SEMPI). This technology allows: determination of the depth and plane position of pipelines, quantitative evaluation of the insulation resistance and delimitation of zones with coating damages, estimation of the performance of the cathodic protection system (CPS) and detection of its connections to out-of-service pipes and other grounded constructions, and assessment of the soil aggressively. The SEMPI technology is based on the approximation of pipelines by heterogeneous transmission lines with variable leakage conductance and pipe impedance to represent insulation coating and wall thickness damages. Based on the result of simulations, we have optimized the field measurements and developed the interpretation procedure of experimental data. The field operations include surface measurements of magnetic field, voltage on the control posts of the CPS and soil resistivity. In zones with coating damages the detailed measurements can be performed using magnetic or electric field to increase the resolution in localizing and evaluating the insulation damages. The SEMPI technology has been applied for inspections of pipelines with different technical characteristics in complicated environmental conditions. The examples presented in this work confirm the high efficiency of the developed technology for external integrity evaluation of pipelines. (author)

  6. Bending-induced electromechanical coupling and large piezoelectric response in a micromachined diaphragm

    KAUST Repository

    Wang, Zhihong; Yao, Yingbang; Wang, Xianbin; Yue, Weisheng; Chen, Longqing; Zhang, Xixiang

    2013-01-01

    We investigated the dependence of electromechanical coupling and the piezoelectric response of a micromachined Pb(Zr 0.52 Ti 0.48)O 3 (PZT) diaphragm on its curvature by observing the impedance spectrum and central deflection responses to a small AC

  7. Femtosecond laser micromachining of polylactic acid/graphene composites for designing interdigitated microelectrodes for sensor applications

    Science.gov (United States)

    Paula, Kelly T.; Gaál, Gabriel; Almeida, G. F. B.; Andrade, M. B.; Facure, Murilo H. M.; Correa, Daniel S.; Riul, Antonio; Rodrigues, Varlei; Mendonça, Cleber R.

    2018-05-01

    There is an increasing interest in the last years towards electronic applications of graphene-based materials and devices fabricated from patterning techniques, with the ultimate goal of high performance and temporal resolution. Laser micromachining using femtosecond pulses is an attractive methodology to integrate graphene-based materials into functional devices as it allows changes to the focal volume with a submicrometer spatial resolution due to the efficient nonlinear nature of the absorption, yielding rapid prototyping for innovative applications. We present here the patterning of PLA-graphene films spin-coated on a glass substrate using a fs-laser at moderate pulse energies to fabricate interdigitated electrodes having a minimum spatial resolution of 5 μm. Raman spectroscopy of the PLA-graphene films indicated the presence of multilayered graphene fibers. Subsequently, the PLA-graphene films were micromachined using a femtosecond laser oscillator delivering 50-fs pulses and 800 nm, where the pulse energy and scanning speed was varied in order to determine the optimum irradiation parameters (16 nJ and 100 μm/s) to the fabrication of microstructures. The micromachined patterns were characterized by optical microscopy and submitted to electrical measurements in liquid samples, clearly distinguishing all tastes tested. Our results confirm the femtosecond laser micromachining technique as an interesting approach to efficiently pattern PLA-graphene filaments with high precision and minimal mechanical defects, allowing the easy fabrication of interdigitated structures and an alternative method to those produced by conventional photolithography.

  8. Femtosecond laser micromachining of compound parabolic concentrator fiber tipped glucose sensors

    DEFF Research Database (Denmark)

    Hassan, Hafeez Ul; Lacraz, Amédée; Kalli, Kyriacos

    2017-01-01

    We report on highly accurate femtosecond (fs) laser micromachining of a compound parabolic concentrator (CPC) fiber tip on a polymer optical fiber (POF). The accuracy is reflected in an unprecedented correspondence between the numerically predicted and experimentally found improvement in fluoresc...

  9. Sensitivity of Micromachined Joule-Thomson Cooler to Clogging Due to Moisture

    NARCIS (Netherlands)

    Cao, Haishan; Vanapalli, Srinivas; Holland, Herman J.; Vermeer, Cristian Hendrik; ter Brake, Hermanus J.M.

    2015-01-01

    A major issue in long-term operation of micromachined Joule-Thomson coolers is the clogging of the microchannels and/or the restriction due to the deposition of water molecules present in the working fluid. In this study, we present the performance of a microcooler operated with nitrogen gas with

  10. Design challenges for stepper motor actuated microvalve based on fine and micro-machining

    NARCIS (Netherlands)

    Fazal, I.; Elwenspoek, Michael Curt

    2007-01-01

    We present a normally open stepper motor actuated microvalve based on micro and fine-machining technique. In this paper, first we have described how the larger controllable flow range can be achieved with simple micromachining techniques and secondly we have presented the results which show how the

  11. The technology of surface coatings by electron-beam (EB) with special reference to the wood industry

    International Nuclear Information System (INIS)

    Dahlan bin Haji Mohd

    1989-01-01

    The use of electron-beam as a processing means in surface coatings is discussed. Special attention has been given to this technology in relation to the surface coatings of wood. The main features of its technology and industrial requirements are outlined. (author)

  12. Enhanced Vision Flight Deck Technology for Commercial Aircraft Low-Visibility Surface Operations

    Science.gov (United States)

    Arthur, Jarvis J., III; Norman, R. Michael; Kramer, Lynda J.; Prinzel, Lawrence J., III; Ellis, Kyle K. E.; Harrison, Stephanie J.; Comstock, J. Ray

    2013-01-01

    NASA Langley Research Center and the FAA collaborated in an effort to evaluate the effect of Enhanced Vision (EV) technology display in a commercial flight deck during low visibility surface operations. Surface operations were simulated at the Memphis, TN (FAA identifier: KMEM) air field during nighttime with 500 Runway Visual Range (RVR) in a high-fidelity, full-motion simulator. Ten commercial airline flight crews evaluated the efficacy of various EV display locations and parallax and mini cation effects. The research paper discusses qualitative and quantitative results of the simulation experiment, including the effect of EV display placement on visual attention, as measured by the use of non-obtrusive oculometry and pilot mental workload. The results demonstrated the potential of EV technology to enhance situation awareness which is dependent on the ease of access and location of the displays. Implications and future directions are discussed.

  13. Innovative nuclear technologies based on radiation induced surface activation (RISA). 1. The project overview

    International Nuclear Information System (INIS)

    Fujisawa, Kyosuke; Morooka, Shinichi; Hishida, Mamoru

    2004-01-01

    This research of the Innovative nuclear technologies based on Radiation Induced Surface Activation (RISA) is due to start from 2003 and to be ended to 2006, and performed fund by Ministry of Economy, Trade and Industry (METI) Japan. One of the innovative technologies is to develop a high performance corrosion-proof film to prevent the surface of reactor internals from stress corrosion cracking (SCC), the other one is to develop the film for improving the heat transfer performance a high performance of the nuclear fuel rod. Both of these properties are derived under gamma ray irradiation by the RISA effect. This paper reports about the summary of this subsidy enterprise by METI. (author)

  14. A Novel RFID Sensing System Using Enhanced Surface Wave Technology for Battery Exchange Stations

    Directory of Open Access Journals (Sweden)

    Yeong-Lin Lai

    2014-01-01

    Full Text Available This paper presents a novel radio-frequency identification (RFID sensing system using enhanced surface wave technology for battery exchange stations (BESs of electric motorcycles. Ultrahigh-frequency (UHF RFID technology is utilized to automatically track and manage battery and user information without manual operation. The system includes readers, enhanced surface wave leaky cable antennas (ESWLCAs, coupling cable lines (CCLs, and small radiation patches (SRPs. The RFID sensing system overcomes the electromagnetic interference in the metallic environment of a BES cabinet. The developed RFID sensing system can effectively increase the efficiency of BES operation and promote the development of electric vehicles which solve the problem of air pollution as well as protect the environment of the Earth.

  15. Enhanced vision flight deck technology for commercial aircraft low-visibility surface operations

    Science.gov (United States)

    Arthur, Jarvis J.; Norman, R. M.; Kramer, Lynda J.; Prinzel, Lawerence J.; Ellis, Kyle K.; Harrison, Stephanie J.; Comstock, J. R.

    2013-05-01

    NASA Langley Research Center and the FAA collaborated in an effort to evaluate the effect of Enhanced Vision (EV) technology display in a commercial flight deck during low visibility surface operations. Surface operations were simulated at the Memphis, TN (FAA identifier: KMEM) airfield during nighttime with 500 Runway Visual Range (RVR) in a high-fidelity, full-motion simulator. Ten commercial airline flight crews evaluated the efficacy of various EV display locations and parallax and minification effects. The research paper discusses qualitative and quantitative results of the simulation experiment, including the effect of EV display placement on visual attention, as measured by the use of non-obtrusive oculometry and pilot mental workload. The results demonstrated the potential of EV technology to enhance situation awareness which is dependent on the ease of access and location of the displays. Implications and future directions are discussed.

  16. A Three-Dimensional Enormous Surface Area Aluminum Microneedle Array with Nanoporous Structure

    Directory of Open Access Journals (Sweden)

    Po Chun Chen

    2013-01-01

    Full Text Available We proposed fabricating an aluminum microneedle array with a nanochannel structure on the surface by combining micromachining, electrolyte polishing, and anodization methods. The microneedle array provides a three-dimensional (3D structure that possesses several hundred times more surface area than a traditional nanochannel template. Therefore, the microneedle array can potentially be used in many technology applications. This 3D microneedle array device can not only be used for painless injection or extraction, but also for storage, highly sensitive detection, drug delivery, and microelectrodes. From the calculation we made, the microneedle array not only increases surface area, but also enlarges the capacity of the device. Therefore, the microneedle array can further be used on many detecting, storing, or drug delivering applications.

  17. A Three-Dimensional Enormous Surface Area Aluminum Microneedle Array with Nanoporous Structure

    International Nuclear Information System (INIS)

    Chen, P.Ch.; Zou, J.; Hsieh, Sh.J.; Chen, Ch.Ch.

    2013-01-01

    We proposed fabricating an aluminum micro needle array with a nano channel structure on the surface by combining micromachining, electrolyte polishing, and anodization methods. The micro needle array provides a three-dimensional (3D) structure that possesses several hundred times more surface area than a traditional nano channel template. Therefore, the micro needle array can potentially be used in many technology applications. This 3D micro needle array device can not only be used for painless injection or extraction, but also for storage, highly sensitive detection, drug delivery, and microelectrodes. From the calculation we made, the micro needle array not only increases surface area, but also enlarges the capacity of the device. Therefore, the micro needle array can further be used on many detecting, storing, or drug delivering applications.

  18. Damping control of micromachined lowpass mechanical vibration isolation filters using electrostatic actuation with electronic signal processing

    Science.gov (United States)

    Dean, Robert; Flowers, George; Sanders, Nicole; MacAllister, Ken; Horvath, Roland; Hodel, A. S.; Johnson, Wayne; Kranz, Michael; Whitley, Michael

    2005-05-01

    Some harsh environments, such as those encountered by aerospace vehicles and various types of industrial machinery, contain high frequency/amplitude mechanical vibrations. Unfortunately, some very useful components are sensitive to these high frequency mechanical vibrations. Examples include MEMS gyroscopes and resonators, oscillators and some micro optics. Exposure of these components to high frequency mechanical vibrations present in the operating environment can result in problems ranging from an increased noise floor to component failure. Passive micromachined silicon lowpass filter structures (spring-mass-damper) have been demonstrated in recent years. However, the performance of these filter structures is typically limited by low damping (especially if operated in near-vacuum environments) and a lack of tunability after fabrication. Active filter topologies, such as piezoelectric, electrostrictive-polymer-film and SMA have also been investigated in recent years. Electrostatic actuators, however, are utilized in many micromachined silicon devices to generate mechanical motion. They offer a number of advantages, including low power, fast response time, compatibility with silicon micromachining, capacitive position measurement and relative simplicity of fabrication. This paper presents an approach for realizing active micromachined mechanical lowpass vibration isolation filters by integrating an electrostatic actuator with the micromachined passive filter structure to realize an active mechanical lowpass filter. Although the electrostatic actuator can be used to adjust the filter resonant frequency, the primary application is for increasing the damping to an acceptable level. The physical size of these active filters is suitable for use in or as packaging for sensitive electronic and MEMS devices, such as MEMS vibratory gyroscope chips.

  19. Position-sensitive radiation monitoring (surface contamination monitor). Innovative technology summary report

    International Nuclear Information System (INIS)

    1999-06-01

    The Shonka Research Associates, Inc. Position-Sensitive Radiation Monitor both detects surface radiation and prepares electronic survey map/survey report of surveyed area automatically. The electronically recorded map can be downloaded to a personal computer for review and a map/report can be generated for inclusion in work packages. Switching from beta-gamma detection to alpha detection is relatively simple and entails moving a switch position to alpha and adjusting the voltage level to an alpha detection level. No field calibration is required when switching from beta-gamma to alpha detection. The system can be used for free-release surveys because it meets the federal detection level sensitivity limits requires for surface survey instrumentation. This technology is superior to traditionally-used floor contamination monitor (FCM) and hand-held survey instrumentation because it can precisely register locations of radioactivity and accurately correlate contamination levels to specific locations. Additionally, it can collect and store continuous radiological data in database format, which can be used to produce real-time imagery as well as automated graphics of survey data. Its flexible design can accommodate a variety of detectors. The cost of the innovative technology is 13% to 57% lower than traditional methods. This technology is suited for radiological surveys of flat surfaces at US Department of Energy (DOE) nuclear facility decontamination and decommissioning (D and D) sites or similar public or commercial sites

  20. Position-sensitive radiation monitoring (surface contamination monitor). Innovative technology summary report

    Energy Technology Data Exchange (ETDEWEB)

    1999-06-01

    The Shonka Research Associates, Inc. Position-Sensitive Radiation Monitor both detects surface radiation and prepares electronic survey map/survey report of surveyed area automatically. The electronically recorded map can be downloaded to a personal computer for review and a map/report can be generated for inclusion in work packages. Switching from beta-gamma detection to alpha detection is relatively simple and entails moving a switch position to alpha and adjusting the voltage level to an alpha detection level. No field calibration is required when switching from beta-gamma to alpha detection. The system can be used for free-release surveys because it meets the federal detection level sensitivity limits requires for surface survey instrumentation. This technology is superior to traditionally-used floor contamination monitor (FCM) and hand-held survey instrumentation because it can precisely register locations of radioactivity and accurately correlate contamination levels to specific locations. Additionally, it can collect and store continuous radiological data in database format, which can be used to produce real-time imagery as well as automated graphics of survey data. Its flexible design can accommodate a variety of detectors. The cost of the innovative technology is 13% to 57% lower than traditional methods. This technology is suited for radiological surveys of flat surfaces at US Department of Energy (DOE) nuclear facility decontamination and decommissioning (D and D) sites or similar public or commercial sites.

  1. High performance workflow implementation for protein surface characterization using grid technology

    Directory of Open Access Journals (Sweden)

    Clematis Andrea

    2005-12-01

    Full Text Available Abstract Background This study concerns the development of a high performance workflow that, using grid technology, correlates different kinds of Bioinformatics data, starting from the base pairs of the nucleotide sequence to the exposed residues of the protein surface. The implementation of this workflow is based on the Italian Grid.it project infrastructure, that is a network of several computational resources and storage facilities distributed at different grid sites. Methods Workflows are very common in Bioinformatics because they allow to process large quantities of data by delegating the management of resources to the information streaming. Grid technology optimizes the computational load during the different workflow steps, dividing the more expensive tasks into a set of small jobs. Results Grid technology allows efficient database management, a crucial problem for obtaining good results in Bioinformatics applications. The proposed workflow is implemented to integrate huge amounts of data and the results themselves must be stored into a relational database, which results as the added value to the global knowledge. Conclusion A web interface has been developed to make this technology accessible to grid users. Once the workflow has started, by means of the simplified interface, it is possible to follow all the different steps throughout the data processing. Eventually, when the workflow has been terminated, the different features of the protein, like the amino acids exposed on the protein surface, can be compared with the data present in the output database.

  2. Development of micro capacitive accelerometer for subsurface microseismic measurement. Second Report; Micromachining ni yoru chika danseiha kenshutsu no tame no silicone yoryogata kasokudo sensor no seisaku. 2

    Energy Technology Data Exchange (ETDEWEB)

    Nishizawa, M; Lim, G; Niitsuma, H; Esashi, M [Tohoku University, Sendai (Japan)

    1997-10-22

    Micromachining-aided manufacture is under way of a silicon capacitive accelerator sensor, high in sensitivity and broad in bandwidth, for detecting subsurface microseismic waves. The sensor detects acceleration by use of changes in capacities of the top and bottom capacitors generated when a spring-supported weight experiences displacement upon application of acceleration to the said weight. A diode bridge circuit is employed as the circuit for detecting acceleration. As for sensitivity of the sensor, when the virtual noise inputted into the electronic circuit is presumed at 1{mu}V and the circuit driving voltage at 5V, the sensor minimum detectability will be 2.5mgal in the presence of a 3{mu}m gap between the weight and an electrode plate. The natural vibration frequency is set at 1kHz. Such specifications may be realized using the current micromachining technology, and possibilities are that the bandwidth will be further expanded when the sensor is used in a servo-type configuration. The effort is still at the stage of acceleration sensor manufacturing, with a stopper just formed for the silicon weight. 9 refs., 6 figs., 1 tab.

  3. Feasibility and its characteristics of CO2 laser micromachining-based PMMA anti-scattering grid estimated by MCNP code simulation.

    Science.gov (United States)

    Bae, Jun Woo; Kim, Hee Reyoung

    2018-01-01

    Anti-scattering grid has been used to improve the image quality. However, applying a commonly used linear or parallel grid would cause image distortion, and focusing grid also requires a precise fabrication technology, which is expensive. To investigate and analyze whether using CO2 laser micromachining-based PMMA anti-scattering grid can improve the performance of the grid at a lower cost. Thus, improvement of grid performance would result in improvement of image quality. The cross-sectional shape of CO2 laser machined PMMA is similar to alphabet 'V'. The performance was characterized by contrast improvement factor (CIF) and Bucky. Four types of grid were tested, which include thin parallel, thick parallel, 'V'-type and 'inverse V'-type of grid. For a Bucky factor of 2.1, the CIF of the grid with both the "V" and inverse "V" had a value of 1.53, while the thick and thick parallel types had values of 1.43 and 1.65, respectively. The 'V' shape grid manufacture by CO2 laser micromachining showed higher CIF than parallel one, which had same shielding material channel width. It was thought that the 'V' shape grid would be replacement to the conventional parallel grid if it is hard to fabricate the high-aspect-ratio grid.

  4. Nanostructured surfaces using thermal nanoimprint lithography: Applications in thin membrane technology, piezoelectric energy harvesting and tactile pressure sensing

    Science.gov (United States)

    Nabar, Bhargav Pradip

    Oxide nanorods were characterized to determine their piezoelectric response to an applied force. An atomic force microscope operating in the force spectroscopy mode was used to apply forces in the nN range. In contrast to previously published reports using lateral tip motion (C-AFM), the action of the tip in our experiment was perpendicular to the plane of the nanorods, allowing a more defined tip -- nanorod interaction. Voltage pulses of a positive polarity with amplitude ranging from hundreds of microV to few mV were observed. The tip -- nanorod interaction was modeled using commercial solid modeling software and was simulated using finite element analysis. Comparison of the results yielded useful observations for design of piezoelectric energy harvesters/sensors using ZnO nanorods. A nanoelectromechanical (NEMS) piezoelectric energy harvester using crystalline ZnO nanowires is developed. The device converts ambient vibrations into usable electrical energy for low power sensor applications. This is accomplished by mechanical excitation of an ordered ZnO nanorod array using a suspended bulk micromachined proof mass. The device is capable of generating up to 14.2 mV single polarity voltage under an input vibration of amplitude 1 g (9.8 m/s2) at a frequency of 1.10 kHz. Finally, large area arrays of ordered ZnO piezoelectric nanorods are developed on flexible substrates towards self-powered sensing skin for robots. The sensor array is designed to measure tactile pressure in the 10 kPa-- 200 kPa range with 1 mm spatial resolution. A voltage signal in the range of few mV is observed in response to applied pressure. This work represents the first demonstration of perfectly ordered, vertically aligned, crystalline ZnO nanorod arrays, fabricated in polyimides to ensure conformity to non-planar surfaces such as a robot's. The sensors are self-packaged using a flexible substrate and a superstrate. In addition to the novelty of the sensor structure itself, the work includes an

  5. An Integrated Surface Engineering Technology Development for Improving Energy Efficiency of Engine Components

    Energy Technology Data Exchange (ETDEWEB)

    Stephen Hsu; Liming Chang; Huan Zhan

    2009-05-31

    Frictional losses are inherent in most practical mechanical systems. The ability to control friction offers many opportunities to achieve energy conservation. Over the years, materials, lubricants, and surface modifications have been used to reduce friction in automotive and diesel engines. However, in recent years, progress in friction reduction technology has slowed because many of the inefficiencies have been eliminated. A new avenue for friction reduction is needed. Designing surfaces specifically for friction reduction with concomitant enhanced durability for various engine components has emerged recently as a viable opportunity due to advances in fabrication and surface finishing techniques. Recently, laser ablated dimples on surfaces have shown friction reduction properties and have been demonstrated successfully in conformal contacts such as seals where the speed is high and the load is low. The friction reduction mechanism in this regime appears to depend on the size, patterns, and density of dimples in the contact. This report describes modeling efforts in characterizing surface textures and understanding their mechanisms for enhanced lubrication under high contact pressure conditions. A literature survey is first presented on the development of descriptors for irregular surface features. This is followed by a study of the hydrodynamic effects of individual micro-wedge dimples using the analytical solution of the 1-D Reynolds equation and the determination of individual components of the total friction resistance. The results obtained provide a better understanding of the dimple orientation effects and the approach which may be used to further compare the friction reduction provided by different texture patterns.

  6. Sustainable Development and Airport Surface Access: The Role of Technological Innovation and Behavioral Change

    Directory of Open Access Journals (Sweden)

    Bilal Qazi

    2013-04-01

    Full Text Available Sustainable development reflects an underlying tension to achieve economic growth whilst addressing environmental challenges, and this is particularly the case for the aviation sector. Although much of the aviation-related focus has fallen on reducing aircraft emissions, airports have also been under increasing pressure to support the vision of a low carbon energy future. One of the main sources of airport-related emissions is passenger journeys to and from airports (the surface access component of air travel, which is the focus of this paper. Two aspects associated with the relationship between sustainable development and airport surface access are considered. Firstly, there is an evaluation of three technological innovation options that will enable sustainable transport solutions for surface access journeys: telepresence systems to reduce drop-off/pick-up trips, techniques to improve public transport and options to encourage the sharing of rides. Secondly, the role of behavioral change for surface access journeys from a theoretical perspective, using empirical data from Manchester airport, is evaluated. Finally, the contribution of technology and behavioral intervention measures to improvements in sustainable development are discussed.

  7. Oriented coupling of major histocompatibility complex (MHC) to sensor surfaces using light assisted immobilisation technology

    DEFF Research Database (Denmark)

    Snabe, Torben; Røder, Gustav Andreas; Neves-Petersen, Maria Teresa

    2005-01-01

    Controlled and oriented immobilisation of proteins for biosensor purposes is of extreme interest since this provides more efficient sensors with a larger density of active binding sites per area compared to sensors produced by conventional immobilisation. In this paper oriented coupling of a major...... histocompatibility complex (MHC class I) to a sensor surface is presented. The coupling was performed using light assisted immobilisation--a novel immobilisation technology which allows specific opening of particular disulphide bridges in proteins which then is used for covalent bonding to thiol-derivatised surfaces...... via a new disulphide bond. Light assisted immobilisation specifically targets the disulphide bridge in the MHC-I molecule alpha(3)-domain which ensures oriented linking of the complex with the peptide binding site exposed away from the sensor surface. Structural analysis reveals that a similar...

  8. Hybrid membrane-microfluidic components using a novel ceramic MEMS technology

    Science.gov (United States)

    Lutz, Brent J.; Polyakov, Oleg; Rinaldo, Chris

    2012-03-01

    A novel hybrid nano/microfabrication technology has been employed to produce unique MEMS and microfluidic components that integrate nanoporous membranes. The components are made by micromachining a self-organized nanostructured ceramic material that is biocompatible and amenable to surface chemistry modification. Microfluidic structures, such as channels and wells, can be made with a precision of membranes can be integrated into the bottom of these structures, featuring a wide range of possible thicknesses, from 100 micron to membranes may be non-porous or porous (with controllable pore sizes from 200 nm to technology is highly scaleable, and thus can yield low-cost, reliable, disposable microcomponents and devices. Specific applications that can benefit from this technology includes cell culturing and assays, imaging by cryo-electron tomography, environmental sample processing, as well as many others.

  9. Micromachined three-dimensional electrode arrays for transcutaneous nerve tracking

    Science.gov (United States)

    Rajaraman, Swaminathan; Bragg, Julian A.; Ross, James D.; Allen, Mark G.

    2011-08-01

    We report the development of metal transfer micromolded (MTM) three-dimensional microelectrode arrays (3D MEAs) for a transcutaneous nerve tracking application. The measurements of electrode-skin-electrode impedance (ESEI), electromyography (EMG) and nerve conduction utilizing these minimally invasive 3D MEAs are demonstrated in this paper. The 3D MEAs used in these measurements consist of a metalized micro-tower array that can penetrate the outer layers of the skin in a painless fashion and are fabricated using MTM technology. Two techniques, an inclined UV lithography approach and a double-side exposure of thick negative tone resist, have been developed to fabricate the 3D MEA master structure. The MEAs themselves are fabricated from the master structure utilizing micromolding techniques. Metal patterns are transferred during the micromolding process, thereby ensuring reduced process steps compared to traditional silicon-based approaches. These 3D MEAs have been packaged utilizing biocompatible Kapton® substrates. ESEI measurements have been carried out on test human subjects with standard commercial wet electrodes as a reference. The 3D MEAs demonstrate an order of magnitude lower ESEI (normalized to area) compared to wet electrodes for an area that is 12.56 times smaller. This compares well with other demonstrated approaches in literature. For a nerve tracking demonstration, we have chosen EMG and nerve conduction measurements on test human subjects. The 3D MEAs show 100% improvement in signal power and SNR/√area as compared to standard electrodes. They also demonstrate larger amplitude signals and faster rise times during nerve conduction measurements. We believe that this microfabrication and packaging approach scales well to large-area, high-density arrays required for applications like nerve tracking. This development will increase the stimulation and recording fidelity of skin surface electrodes, while increasing their spatial resolution by an order of

  10. Micromachined three-dimensional electrode arrays for transcutaneous nerve tracking

    International Nuclear Information System (INIS)

    Rajaraman, Swaminathan; Allen, Mark G; Bragg, Julian A; Ross, James D

    2011-01-01

    We report the development of metal transfer micromolded (MTM) three-dimensional microelectrode arrays (3D MEAs) for a transcutaneous nerve tracking application. The measurements of electrode–skin–electrode impedance (ESEI), electromyography (EMG) and nerve conduction utilizing these minimally invasive 3D MEAs are demonstrated in this paper. The 3D MEAs used in these measurements consist of a metalized micro-tower array that can penetrate the outer layers of the skin in a painless fashion and are fabricated using MTM technology. Two techniques, an inclined UV lithography approach and a double-side exposure of thick negative tone resist, have been developed to fabricate the 3D MEA master structure. The MEAs themselves are fabricated from the master structure utilizing micromolding techniques. Metal patterns are transferred during the micromolding process, thereby ensuring reduced process steps compared to traditional silicon-based approaches. These 3D MEAs have been packaged utilizing biocompatible Kapton® substrates. ESEI measurements have been carried out on test human subjects with standard commercial wet electrodes as a reference. The 3D MEAs demonstrate an order of magnitude lower ESEI (normalized to area) compared to wet electrodes for an area that is 12.56 times smaller. This compares well with other demonstrated approaches in literature. For a nerve tracking demonstration, we have chosen EMG and nerve conduction measurements on test human subjects. The 3D MEAs show 100% improvement in signal power and SNR/√area as compared to standard electrodes. They also demonstrate larger amplitude signals and faster rise times during nerve conduction measurements. We believe that this microfabrication and packaging approach scales well to large-area, high-density arrays required for applications like nerve tracking. This development will increase the stimulation and recording fidelity of skin surface electrodes, while increasing their spatial resolution by an order

  11. Development of New Materials and Technologies for Welding and Surfacing at Research and Production Center 'Welding Processes and Technologies'

    International Nuclear Information System (INIS)

    Kozyrev, N A; Kryukov, R E; Galevsky, G V; Titov, D A; Shurupov, V M

    2015-01-01

    The paper provides description of research into the influence of new materials and technologies on quality parameters of welds and added metal carried out at research and production center «Welding processes and technologies».New welding technologies of tanks for northern conditions are considered, as well as technologies of submerged arc welding involving fluxing agents AN - 348, AN - 60, AN - 67, OK. 10.71 and carbon-fluorine containing additives, new flux cored wires and surfacing technologies, teaching programs and a trainer for welders are designed. (paper)

  12. Technology and human purpose: the problem of solids transport on the Earth's surface

    Science.gov (United States)

    Haff, P. K.

    2012-11-01

    Displacement of mass of limited deformability ("solids") on the Earth's surface is opposed by friction and (the analog of) form resistance - impediments relaxed by rotational motion, self-powering of mass units, and transport infrastructure. These features of solids transport first evolved in the biosphere prior to the emergence of technology, allowing slope-independent, diffusion-like motion of discrete objects as massive as several tons, as illustrated by animal foraging and movement along game trails. However, high-energy-consumption technology powered by fossil fuels required a mechanism that could support fast advective transport of solids, i.e., long-distance, high-volume, high-speed, unidirectional, slope-independent transport across the land surface of materials like coal, containerized fluids, minerals, and economic goods. Pre-technology nature was able to sustain regional- and global-scale advection only in the limited form of piggybacking on geophysical flows of water (river sediment) and air (dust). The appearance of a mechanism for sustained advection of solids independent of fluid flows and gravity appeared only upon the emergence of human purpose. Purpose enables solids advection by, in effect, simulating a continuous potential gradient, otherwise lacking, between discrete and widely separated fossil-fuel energy sources and sinks. Invoking purpose as a mechanism in solids advection is an example of the need to import anthropic principles and concepts into the language and methodology of modern Earth system dynamics. As part of the emergence of a generalized solids advection mechanism, several additional transport requirements necessary to the function of modern large-scale technological systems were also satisfied. These include spatially accurate delivery of advected payload, targetability to essentially arbitrarily located destinations (such as cities), and independence of structure of advected payload from transport mechanism. The latter property

  13. Comparison of eggshell surface sanitization technologies and impacts on consumer acceptability.

    Science.gov (United States)

    Al-Ajeeli, Morouj N; Taylor, T Matthew; Alvarado, Christine Z; Coufal, Craig D

    2016-05-01

    Shell eggs can be contaminated with many types of microorganisms, including bacterial pathogens, and thus present a risk for the transmission of foodborne disease to consumers. Currently, most United States egg processors utilize egg washing and sanitization systems to decontaminate surfaces of shell eggs prior to packaging. However, previous research has indicated that current shell egg sanitization technologies employed in the commercial egg industry may not completely eliminate bacteria from the surface of eggshells, and thus alternative egg sanitization technologies with the potential for increased microbial reductions on eggshells should be investigated. The objectives of this study were to compare the antimicrobial efficacy and consumer sensory attributes of industry-available eggshell sanitization methods (chlorine and quaternary ammonium compounds (QAC) applied via spray) to various alternative egg sanitization technologies. Eggs (White Leghorn hens; n=195) were obtained for evaluation of sanitizer-induced reduction in mesophilic aerobic bacteria (n=90) or inoculated Salmonella Enteritidis (SE) reduction (n=105). Sanitizing treatments evaluated in this experiment were: chlorine spray (100 ppm available chlorine), QAC spray (200 ppm), peracetic acid spray (PAA; 135 ppm) alone or in combination with ultraviolet light (UV; 254 nm), and hydrogen peroxide (H2O2; 3.5% solution) spray in combination with UV (H2O2+UV). For enumeration of aerobic bacteria, eggs were sampled at 0, 7, and 14 days of storage at 4°C; surviving SE cells from inoculated eggs were enumerated by differential plating. Sensory trials were conducted to determine consumer liking of scrambled eggs made from eggs sanitized with chlorine, QAC, H2O2+UV, or no treatment (control). The H2O2 and UV treatment resulted in the greatest reductions in eggshell aerobic plate counts compared to other treatments throughout egg storage (Peggs represents a novel technology that could have important

  14. Plasma-aided surface technology for modification of materials referred to fire protection

    International Nuclear Information System (INIS)

    Dineff, P.; Gospodinova, D.; Kostova, L.; Vladkova, T.; Chen, E.

    2008-01-01

    There has been considerable interest in dielectric barrier air discharge at atmospheric pressure and room temperature over the past decade due to the increased number of industrial applications. New plasma-aided capillary impregnation technology for flame spreading stop and fire protection of porous materials was developed. Research, based on thermogravimetric analysis (TGA), differential thermal analysis (DTA), and differential scanning calorimetry (DSC), proves that plasma-chemical surface pre-treatment exert material change on chemical interaction between phosphorus containing flame retardant and wood matrix (Pinus sylvestris, Bulgaria; Pseudotsuga, Canada)

  15. Photonic Mach-Zehnder modulators driven by surface acoustic waves in AlGaAs technology

    Science.gov (United States)

    Crespo-Poveda, A.; Gargallo, B.; Artundo, I.; Doménech, J. D.; Muñoz, P.; Hey, R.; Biermann, K.; Tahraoui, A.; Santos, P. V.; Cantarero, A.; de Lima, M. M.

    2014-03-01

    In this paper, photonic devices driven by surface acoustic waves and operating in the GHz frequency range are presented. The devices were designed and fabricated in (Al,Ga)As technology. In contrast to previously realized modulators, where part of the light transmission is lost due to destructive interference, in the present devices light only switches paths, avoiding losses. One of the devices presents two output channels with 180°-dephasing synchronization. Odd multiples of the fundamental driving frequency are enabled by adjusting the applied acoustic power. A second and more complex photonic integrated device, based on the acoustic modulation of tunable Arrayed Waveguide Gratings, is also proposed.

  16. Experimental verification of active IR stealth technology by controlling the surface temperature using a thermoelectric element

    Energy Technology Data Exchange (ETDEWEB)

    Kim, Dong Geon; Han, Kuk Il; Choi, Jun Hyuk; Kim, Tae Kuk [Dept. of Mechanical Engineering, Chung Ang University, Seoul (Korea, Republic of)

    2016-10-15

    In this paper, we propose a technique for IR low-observability that uses an active IR signal tuning through the real time control of the object surface temperature according to the varying background environment. This is achieved by applying the proper object surface temperature obtained to result in the minimum radiance difference between the object and the background. Experimental verification by using the thermoelectric temperature control element shows that the IR radiance contrast between the object and the background can be reduced up to 99% during the night and up to 95% during the day time as compared to the un-tuned original radiance contrast values. The stealth technology demonstrated in this paper may be applied for many military systems needed for the IR stealth performance when a suitable temperature control unit is developed.

  17. Experimental verification of active IR stealth technology by controlling the surface temperature using a thermoelectric element

    International Nuclear Information System (INIS)

    Kim, Dong Geon; Han, Kuk Il; Choi, Jun Hyuk; Kim, Tae Kuk

    2016-01-01

    In this paper, we propose a technique for IR low-observability that uses an active IR signal tuning through the real time control of the object surface temperature according to the varying background environment. This is achieved by applying the proper object surface temperature obtained to result in the minimum radiance difference between the object and the background. Experimental verification by using the thermoelectric temperature control element shows that the IR radiance contrast between the object and the background can be reduced up to 99% during the night and up to 95% during the day time as compared to the un-tuned original radiance contrast values. The stealth technology demonstrated in this paper may be applied for many military systems needed for the IR stealth performance when a suitable temperature control unit is developed

  18. Fabrication of micro-prominences on PTFE surface using proton beam writing

    Energy Technology Data Exchange (ETDEWEB)

    Kitamura, Akane, E-mail: ogawa.akane@jaea.go.jp [Department of Advanced Radiation Technology, Takasaki Advanced Radiation Research Institute, Japan Atomic Energy Agency, 1233 Watanuki-Machi, Takasaki, Gunma 370-1292 (Japan); Satoh, Takahiro; Koka, Masashi [Department of Advanced Radiation Technology, Takasaki Advanced Radiation Research Institute, Japan Atomic Energy Agency, 1233 Watanuki-Machi, Takasaki, Gunma 370-1292 (Japan); Kobayashi, Tomohiro [Advanced Science Institute, RIKEN, 2-1 Hirosawa, Wako-shi, Saitama 350-0198 (Japan); Kamiya, Tomihiro [Department of Advanced Radiation Technology, Takasaki Advanced Radiation Research Institute, Japan Atomic Energy Agency, 1233 Watanuki-Machi, Takasaki, Gunma 370-1292 (Japan)

    2013-07-01

    Polytetrafluoroethylene (PTFE) is a typical fluoropolymer and it has several desirable technological properties such as electrical insulation, solid lubrication etc. However, the conventional microstructuring methods have not been well applied to PTFE due to its chemical inertness. Some effective micromachining using synchrotron radiation or ion beam irradiation has been reported. In this study, we create micro-prominences by raising the original surface using proton beam writing (PBW) without chemical etching. A conical prominence was formed by spiral drawing from the center with a 3 MeV proton beam. The body was porous, and the bulk PTFE below the prominence changed to fragmented structures. With decreasing writing speed, the prominence became taller but the height peaked. The prominence gradually reduced in size after the speed reached the optimum value. We expect that these porous projections with high aspect ratio will be versatile in medical fields and microelectromechanical systems (MEMS) technology.

  19. Nanofluidic bubble pump using surface tension directed gas injection

    NARCIS (Netherlands)

    Tas, Niels Roelof; Berenschot, Johan W.; Lammerink, Theodorus S.J.; Elwenspoek, Michael Curt; van den Berg, Albert

    2002-01-01

    A new concept for liquid manipulation has been developed and implemented in surface-micromachined fluid channels. It is based on the surface tension directed injection of a gas into the liquid flow through micrometer-sized holes in the microchannel wall. The injected gas is directed to an exhaust by

  20. Optimization of design parameters for bulk micromachined silicon membranes for piezoresistive pressure sensing application

    International Nuclear Information System (INIS)

    Belwanshi, Vinod; Topkar, Anita

    2016-01-01

    Finite element analysis study has been carried out to optimize the design parameters for bulk micro-machined silicon membranes for piezoresistive pressure sensing applications. The design is targeted for measurement of pressure up to 200 bar for nuclear reactor applications. The mechanical behavior of bulk micro-machined silicon membranes in terms of deflection and stress generation has been simulated. Based on the simulation results, optimization of the membrane design parameters in terms of length, width and thickness has been carried out. Subsequent to optimization of membrane geometrical parameters, the dimensions and location of the high stress concentration region for implantation of piezoresistors have been obtained for sensing of pressure using piezoresistive sensing technique.

  1. Optimized design of micromachined electric field mills to maximize electrostatic field sensitivity

    Directory of Open Access Journals (Sweden)

    Yu Zhou

    2016-07-01

    Full Text Available This paper describes the design optimization of a micromachined electric field mill, in relation to maximizing its output signal. The cases studied are for a perforated electrically grounded shutter vibrating laterally over sensing electrodes. It is shown that when modeling the output signal of the sensor, the differential charge on the sense electrodes when exposed to vs. visibly shielded from the incident electric field must be considered. Parametric studies of device dimensions show that the shutter thickness and its spacing from the underlying electrodes should be minimized as these parameters very strongly affect the MEFM signal. Exploration of the shutter perforation size and sense electrode width indicate that the best MEFM design is one where shutter perforation widths are a few times larger than the sense electrode widths. Keywords: MEFM, Finite element method, Electric field measurement, MEMS, Micromachining

  2. Femtosecond laser micro-machined polyimide films for cell scaffold applications

    DEFF Research Database (Denmark)

    Antanavičiute, Ieva; Šimatonis, Linas; Ulčinas, Orestas

    2018-01-01

    of commercially available 12.7 and 25.4μm thickness polyimide (PI) film was applied. Mechanical properties of the fabricated scaffolds, i.e. arrays of differently spaced holes, were examined via custom-built uniaxial micro-tensile testing and finite element method simulations. We demonstrate that experimental...... micro-tensile testing results could be numerically simulated and explained by two-material model, assuming that 2-6μm width rings around the holes possessed up to five times higher Young's modulus and yield stress compared with the rest of the laser intacted PI film areas of 'dog-bone'-shaped specimens......Engineering of sophisticated synthetic 3D scaffolds that allow controlling behaviour and location of the cells requires advanced micro/nano-fabrication techniques. Ultrafast laser micro-machining employing a 1030-nm wavelength Yb:KGW femtosecond laser and a micro-fabrication workstation for micro-machining...

  3. A novel micromachined shadow mask system with self-alignment and gap control capability

    International Nuclear Information System (INIS)

    Hong, Jung Moo; Zou Jun

    2008-01-01

    We present a novel micromachined shadow mask system, which is capable of accurate self-alignment and mask-substrate gap control. The shadow mask system consists of a silicon shadow mask and a silicon carrier wafer with pyramidal cavities fabricated with bulk micromachining. Self-alignment and gap control of the shadow mask and the fabrication substrate can readily be achieved by using matching pairs of pyramidal cavities and steel spheres placed between. The layer-to-layer alignment accuracy of the new shadow mask system has been experimentally characterized and verified using both optical and atomic force microscopic measurements. As an application of this new shadow mask system, an organic thin-film transistor (OTFT) using pentacene as the semiconductor layer has been successfully fabricated and tested

  4. Optimization of design parameters for bulk micromachined silicon membranes for piezoresistive pressure sensing application

    Science.gov (United States)

    Belwanshi, Vinod; Topkar, Anita

    2016-05-01

    Finite element analysis study has been carried out to optimize the design parameters for bulk micro-machined silicon membranes for piezoresistive pressure sensing applications. The design is targeted for measurement of pressure up to 200 bar for nuclear reactor applications. The mechanical behavior of bulk micro-machined silicon membranes in terms of deflection and stress generation has been simulated. Based on the simulation results, optimization of the membrane design parameters in terms of length, width and thickness has been carried out. Subsequent to optimization of membrane geometrical parameters, the dimensions and location of the high stress concentration region for implantation of piezoresistors have been obtained for sensing of pressure using piezoresistive sensing technique.

  5. Sub 100 nm proton beam micromachining: theoretical calculations on resolution limits

    International Nuclear Information System (INIS)

    Kan, J.A. van; Sum, T.C.; Osipowicz, T.; Watt, F.

    2000-01-01

    Proton beam micromachining is a novel direct-write process for the production of three-dimensional (3D) microstructures. A focused beam of MeV protons is scanned in a pre-determined pattern over a suitable resist material (e.g. PMMA or SU-8) and the latent image formed is subsequently developed chemically. In this paper calculations on theoretical resolution limits of proton beam micromachined three-dimensional microstructures are presented. Neglecting the finite beam size, a Monte Carlo ion transport code was used in combination with a theoretical model describing the delta-ray (δ-ray) energy deposition to determine the lateral energy deposition distribution in PMMA resist material. The energy deposition distribution of ion induced secondary electrons (δ-rays) has been parameterized using analytical models. It is assumed that the attainable resolution is limited by a convolution of the spread of the ion beam and energy deposition of the δ-rays

  6. Micromachined sensor for stress measurement and micromechanical study of free-standing thin films for MEMS applications

    Science.gov (United States)

    Zhang, Ping

    Microelectromechanical systems (MEMS) have a wide range of applications. In the field of wireless and microwave technology, considerable attention has been given to the development and integration of MEMS-based RF (radio frequency) components. An RF MEMS switch requires low insertion loss, high isolation, and low actuation voltage - electrical aspects that have been extensively studied. The mechanical requirements of the switch, such as low sensitivity to built-in stress and high reliability, greatly depend on the micromechanical properties of the switch materials, and have not been thoroughly explored. RF MEMS switches are typically in the form of a free-standing thin film structure. Large stress gradients and across-wafer stress variations developed during fabrication severely degrade their electrical performance. A micromachined stress measurement sensor has been developed that can potentially be employed for in-situ monitoring of stress evolution and stress variation. The sensors were micromachined using five masks on two wafer levels, each measuring 5x3x1 mm. They function by means of an electron tunneling mechanism, where a 2x2 mm silicon nitride membrane elastically deflects under an applied deflection voltage via an external feedback circuitry. For the current design, the sensors are capable of measuring tensile stresses up to the GPa range under deflection voltages of 50--100 V. Sensor functionality was studied by finite element modeling and a theoretical analysis of square membrane deflection. While the mechanical properties of thin films on substrates have been extensively studied, studies of free-standing thin films have been limited due to the practical difficulties in sample handling and testing. Free-standing Al and Al-Ti thin films specimens have been successfully fabricated and microtensile and stress relaxation tests have been performed using a custom-designed micromechanical testing apparatus. A dedicated TEM (transmission electron microscopy

  7. Optimized design of micromachined electric field mills to maximize electrostatic field sensitivity

    OpenAIRE

    Zhou, Yu; Shafai, Cyrus

    2016-01-01

    This paper describes the design optimization of a micromachined electric field mill, in relation to maximizing its output signal. The cases studied are for a perforated electrically grounded shutter vibrating laterally over sensing electrodes. It is shown that when modeling the output signal of the sensor, the differential charge on the sense electrodes when exposed to vs. visibly shielded from the incident electric field must be considered. Parametric studies of device dimensions show that t...

  8. 3D Printed Microtransporters: Compound Micromachines for Spatiotemporally Controlled Delivery of Therapeutic Agents.

    Science.gov (United States)

    Huang, Tian-Yun; Sakar, Mahmut Selman; Mao, Angelo; Petruska, Andrew J; Qiu, Famin; Chen, Xue-Bo; Kennedy, Stephen; Mooney, David; Nelson, Bradley J

    2015-11-01

    Functional compound micromachines are fabricated by a design methodology using 3D direct laser writing and selective physical vapor deposition of magnetic materials. Microtransporters with a wirelessly controlled Archimedes screw pumping mechanism are engineered. Spatiotemporally controlled collection, transport, and delivery of micro particles, as well as magnetic nanohelices inside microfluidic channels are demonstrated. © 2015 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

  9. Predicting the Deflections of Micromachined Electrostatic Actuators Using Artificial Neural Network (ANN

    Directory of Open Access Journals (Sweden)

    Hing Wah LEE

    2009-03-01

    Full Text Available In this study, a general purpose Artificial Neural Network (ANN model based on the feed-forward back-propagation (FFBP algorithm has been used to predict the deflections of a micromachined structures actuated electrostatically under different loadings and geometrical parameters. A limited range of simulation results obtained via CoventorWare™ numerical software will be used initially to train the neural network via back-propagation algorithm. The micromachined structures considered in the analyses are diaphragm, fixed-fixed beams and cantilevers. ANN simulation results are compared with results obtained via CoventorWare™ simulations and existing analytical work for validation purpose. The proposed ANN model accurately predicts the deflections of the micromachined structures with great reduction of simulation efforts, establishing the method superiority. This method can be extended for applications in other sensors particularly for modeling sensors applying electrostatic actuation which are difficult in nature due to the inherent non-linearity of the electro-mechanical coupling response.

  10. Modeling and Experimental Study on Characterization of Micromachined Thermal Gas Inertial Sensors

    Directory of Open Access Journals (Sweden)

    Yan Su

    2010-09-01

    Full Text Available Micromachined thermal gas inertial sensors based on heat convection are novel devices that compared with conventional micromachined inertial sensors offer the advantages of simple structures, easy fabrication, high shock resistance and good reliability by virtue of using a gaseous medium instead of a mechanical proof mass as key moving and sensing elements. This paper presents an analytical modeling for a micromachined thermal gas gyroscope integrated with signal conditioning. A simplified spring-damping model is utilized to characterize the behavior of the sensor. The model relies on the use of the fluid mechanics and heat transfer fundamentals and is validated using experimental data obtained from a test-device and simulation. Furthermore, the nonideal issues of the sensor are addressed from both the theoretical and experimental points of view. The nonlinear behavior demonstrated in experimental measurements is analyzed based on the model. It is concluded that the sources of nonlinearity are mainly attributable to the variable stiffness of the sensor system and the structural asymmetry due to nonideal fabrication.

  11. An in-pipe mobile micromachine using fluid power. A mechanism adaptable to pipe diameters

    International Nuclear Information System (INIS)

    Yoshida, Kazuhiro; Yokota, Shinichi; Takahashi, Ken

    2000-01-01

    To realize micro maintenance robots for small diameter pipes of nuclear reactors and so on, high power in-pipe mobile micromachines have been required. The authors have proposed the bellows microactuator using fluid power and have tried to apply the actuators to in-pipe mobile micromachines. In the previous papers, some inchworm mobile machine prototypes with 25 mm in diameter are fabricated and the traveling performances are experimentally investigated. In this paper, to miniaturize the in-pipe mobile machine and to make it adaptable to pipe diameters, firstly, a simple rubber-tube actuator constrained with a coil-spring is proposed and the static characteristics are investigated. Secondly, a supporting mechanism which utilizes a toggle mechanism and is adaptable to pipe diameters is proposed and the supporting forces are investigated. Finally, an in-pipe mobile micromachine for pipe with 4 - 5 mm in diameter is fabricated and the maximum traveling velocity of 7 mm/s in both ahead and astern movements is experimentally verified. (author)

  12. RISK ASSESSMENT OF SURFACE WATERS ASSOCIATED WITH WATER CIRCULATION TECHNOLOGIES ON TROUT FARMS

    Directory of Open Access Journals (Sweden)

    Marcin Sidoruk

    2014-07-01

    Full Text Available Dynamic development of aquaculture has led to an increasing impact on the status of surface waters. Fish production generates wastes that, at high concentrations, may present a serious risk to the aquatic environment. Studies on the assessment of the impact of water management technologies in trout production on the quality of surface waters were conducted in 2011. Six farms were selected for the studies and were divided into two groups based on water management solutions (n = 3: farms with a flow through system (FTS and farms with a recirculation aquaculture system (RAS. On all farms, water measurement points were set and they depicted the quality of inflow water, the quality of water in ponds and the quality of outflow water. The studies did not demonstrate any impact of applied technology on electrolyte conductivity or calcium and magnesium concentrations in outflow water from a trout operation. In addition, it was found that the use of water for production purposes resulted in a slight increase in phosphorus and total nitrogen concentrations in waste waters.

  13. Development of Innovative Technology to Provide Low-Cost Surface Atmospheric Observations in Data Sparse Regions

    Science.gov (United States)

    Kucera, Paul; Steinson, Martin

    2017-04-01

    Accurate and reliable real-time monitoring and dissemination of observations of surface weather conditions is critical for a variety of societal applications. Applications that provide local and regional information about temperature, precipitation, moisture, and winds, for example, are important for agriculture, water resource monitoring, health, and monitoring of hazard weather conditions. In many regions of the World, surface weather stations are sparsely located and/or of poor quality. Existing stations have often been sited incorrectly, not well-maintained, and have limited communications established at the site for real-time monitoring. The University Corporation for Atmospheric Research (UCAR)/National Center for Atmospheric Research (NCAR), with support from USAID, has started an initiative to develop and deploy low-cost weather instrumentation in sparsely observed regions of the world. The project is focused on improving weather observations for environmental monitoring and early warning alert systems on a regional to global scale. Instrumentation that has been developed use innovative new technologies such as 3D printers, Raspberry Pi computing systems, and wireless communications. The goal of the project is to make the weather station designs, software, and processing tools an open community resource. The weather stations can be built locally by agencies, through educational institutions, and residential communities as a citizen effort to augment existing networks to improve detection of natural hazards for disaster risk reduction. The presentation will provide an overview of the open source weather station technology and evaluation of sensor observations for the initial networks that have been deployed in Africa.

  14. Fabrication of Micromachined SnO2 Based MOS Gas Sensor with Inbuilt Microheater for Detection of Methanol

    Directory of Open Access Journals (Sweden)

    Priyanka Kakoty

    2016-09-01

    Full Text Available This paper presents a simple method to fabricate a vertical closed membrane structured gas sensor on silicon substrate using micromachining technology for methanol detection at lower concentration. An undoped tin dioxide thin film is deposited by DC magnetron sputtering technique on a pair of gold interdigitated microelectrodes of dimension 820 µm ´ 925 µm. A meander shaped platinum micro heater of dimension 1025 µm ´ 1000 µm is incorporated to provide optimum operating temperature (about 350 0C for sensing operation. Energy dispersive X-ray spectroscopy is done to confirm the chemical composition of the sensor. Temperature coefficient of resistance of the inbuilt micro heater is found to be 0.0941 /0C. The sensor resistance shows significant change when micro heater voltage is varied from 1.5 V-3 V. I-V analysis of the sensor is carried out at 25 0C, 50 0C and 75 0C, and shifts in current through the sensor at different temperatures are observed. I-V characterization is also carried out at different methanol concentration levels (50-110 ppm and it is found that at minimum 80 ppm, the sensor exhibits promising result. The response time and recovery time of the sensor is found to be 160 s and 167 s respectively.

  15. Desert water harvesting from TAKYR surfaces: assessing the potential of traditional and experimental technologies in the karakum

    NARCIS (Netherlands)

    Fleskens, L.; Ataev, A.; Mamedov, B.; Spaan, W.P.

    2007-01-01

    From historical times the traditionally nomadic people in desert environments of Turkmenistan have applied a range of innovative technologies to secure water supply for consumptive and productive purposes. These technologies make use of takyrs, flat or slightly sloping dense clay surfaces which act

  16. Parallel-plate submicron gap formed by micromachined low-density pillars for near-field radiative heat transfer

    International Nuclear Information System (INIS)

    Ito, Kota; Miura, Atsushi; Iizuka, Hideo; Toshiyoshi, Hiroshi

    2015-01-01

    Near-field radiative heat transfer has been a subject of great interest due to the applicability to thermal management and energy conversion. In this letter, a submicron gap between a pair of diced fused quartz substrates is formed by using micromachined low-density pillars to obtain both the parallelism and small parasitic heat conduction. The gap uniformity is validated by the optical interferometry at four corners of the substrates. The heat flux across the gap is measured in a steady-state and is no greater than twice of theoretically predicted radiative heat flux, which indicates that the parasitic heat conduction is suppressed to the level of the radiative heat transfer or less. The heat conduction through the pillars is modeled, and it is found to be limited by the thermal contact resistance between the pillar top and the opposing substrate surface. The methodology to form and evaluate the gap promotes the near-field radiative heat transfer to various applications such as thermal rectification, thermal modulation, and thermophotovoltaics

  17. Parallel-plate submicron gap formed by micromachined low-density pillars for near-field radiative heat transfer

    Energy Technology Data Exchange (ETDEWEB)

    Ito, Kota, E-mail: kotaito@mosk.tytlabs.co.jp [Toyota Central Research and Development Laboratories, Nagakute, Aichi 480-1192 (Japan); Research Center for Advanced Science and Technology (RCAST), The University of Tokyo, Komaba, Meguro-ku, Tokyo 153-8904 (Japan); Miura, Atsushi; Iizuka, Hideo [Toyota Central Research and Development Laboratories, Nagakute, Aichi 480-1192 (Japan); Toshiyoshi, Hiroshi [Research Center for Advanced Science and Technology (RCAST), The University of Tokyo, Komaba, Meguro-ku, Tokyo 153-8904 (Japan)

    2015-02-23

    Near-field radiative heat transfer has been a subject of great interest due to the applicability to thermal management and energy conversion. In this letter, a submicron gap between a pair of diced fused quartz substrates is formed by using micromachined low-density pillars to obtain both the parallelism and small parasitic heat conduction. The gap uniformity is validated by the optical interferometry at four corners of the substrates. The heat flux across the gap is measured in a steady-state and is no greater than twice of theoretically predicted radiative heat flux, which indicates that the parasitic heat conduction is suppressed to the level of the radiative heat transfer or less. The heat conduction through the pillars is modeled, and it is found to be limited by the thermal contact resistance between the pillar top and the opposing substrate surface. The methodology to form and evaluate the gap promotes the near-field radiative heat transfer to various applications such as thermal rectification, thermal modulation, and thermophotovoltaics.

  18. A Novel Particulate Matter 2.5 Sensor Based on Surface Acoustic Wave Technology

    Directory of Open Access Journals (Sweden)

    Jiuling Liu

    2018-01-01

    Full Text Available Design, fabrication and experiments of a miniature particulate matter (PM 2.5 sensor based on the surface acoustic wave (SAW technology were proposed. The sensor contains a virtual impactor (VI for particle separation, a thermophoretic precipitator (TP for PM2.5 capture and a SAW sensor chip for PM2.5 mass detection. The separation performance of the VI was evaluated by using the finite element method (FEM model and the PM2.5 deposition characteristic in the TP was obtained by analyzing the thermophoretic theory. Employing the coupling-of-modes (COM model, a low loss and high-quality SAW resonator was designed. By virtue of the micro electro mechanical system (MEMS technology and semiconductor technology, the SAW based PM2.5 sensor detecting probe was fabricated. Then, combining a dual-port SAW oscillator and an air sampler, the experimental platform was set up. Exposing the PM2.5 sensor to the polystyrene latex (PSL particles in a chamber, the sensor performance was evaluated. The results show that by detecting the PSL particles with a certain diameter of 2 μm, the response of the SAW based PM2.5 sensor is linear, and in accordance with the response of the light scattering based PM2.5 monitor. The developed SAW based PM2.5 sensor has great potential for the application of airborne particle detection.

  19. Recent advances in yeast cell-surface display technologies for waste biorefineries.

    Science.gov (United States)

    Liu, Zhuo; Ho, Shih-Hsin; Hasunuma, Tomohisa; Chang, Jo-Shu; Ren, Nan-Qi; Kondo, Akihiko

    2016-09-01

    Waste biorefinery aims to maximize the output of value-added products from various artificial/agricultural wastes by using integrated bioprocesses. To make waste biorefinery economically feasible, it is thus necessary to develop a low-cost, environment-friendly technique to perform simultaneous biodegradation and bioconversion of waste materials. Cell-surface display engineering is a novel, cost-effective technique that can auto-immobilize proteins on the cell exterior of microorganisms, and has been applied for use with waste biofinery. Through tethering different enzymes (e.g., cellulase, lipase, and protease) or metal-binding peptides on cell surfaces, various yeast strains can effectively produce biofuels and biochemicals from sugar/protein-rich waste materials, catalyze waste oils into biodiesels, or retrieve heavy metals from wastewater. This review critically summarizes recent applications of yeast cell-surface display on various types of waste biorefineries, highlighting its potential and future challenges with regard to commercializing this technology. Copyright © 2016 Elsevier Ltd. All rights reserved.

  20. Development of Innovative Technology to Provide Low-Cost Surface Atmospheric Observations

    Science.gov (United States)

    Kucera, Paul; Steinson, Martin

    2016-04-01

    Accurate and reliable real-time monitoring and dissemination of observations of surface weather conditions is critical for a variety of societal applications. Applications that provide local and regional information about temperature, precipitation, moisture, and winds, for example, are important for agriculture, water resource monitoring, health, and monitoring of hazard weather conditions. In many regions in Africa (and other global locations), surface weather stations are sparsely located and/or of poor quality. Existing stations have often been sited incorrectly, not well-maintained, and have limited communications established at the site for real-time monitoring. The US National Weather Service (NWS) International Activities Office (IAO) in partnership with University Corporation for Atmospheric Research (UCAR)/National Center for Atmospheric Research (NCAR) and funded by the United States Agency for International Development (USAID) Office of Foreign Disaster Assistance (OFDA) has started an initiative to develop and deploy low-cost weather instrumentation in sparsely observed regions of the world. The goal is to provide observations for environmental monitoring, and early warning alert systems that can be deployed at weather services in developing countries. Instrumentation is being designed using innovative new technologies such as 3D printers, Raspberry Pi computing systems, and wireless communications. The initial effort is focused on designing a surface network using GIS-based tools, deploying an initial network in Zambia, and providing training to Zambia Meteorological Department (ZMD) staff. The presentation will provide an overview of the project concepts, design of the low cost instrumentation, and initial experiences deploying a surface network deployment in Zambia.

  1. The Mobile Surface Contamination Monitor II environmental radiological characterization utilizing GPS/GIS technologies

    International Nuclear Information System (INIS)

    Wendling, M.A.

    1993-05-01

    Time, cost, and most importantly quality of data are the three factors to measure the success of field radiological characterizations. The application of coupling radiation detection instrumentation to a GPS receiver has dramatically increased the data quality achievable compared to traditional environmental radiological survey methods. Improvements in verifying adequate spatial coverage of an area while collecting data and at,the same time reducing field time requirements can be realized. Data acquired during the recent implementation of the Mobile Surface Contamination Monitor 11 (MSCM-11) will be presented to demonstrate the advantages of this system over traditional radiological survey methods. The comparison will include time and manpower requirements. Linking the complimentary GPS, GIS and radiation detection technologies on a mobile tractor based platform has provided a tool to provide radiological characterization data faster, cheaper, and better to assist in the Environmental Restoration Mission of the Hanford Site

  2. Examining the decontaminability of surfaces from the beginnings of nuclear technology

    International Nuclear Information System (INIS)

    Kunze, S.

    2003-01-01

    Parallel with the development of nuclear technology in the 1950s, methods of examining the decontaminability of surface materials were elaborated, improved, and partly standardized in many countries. In 1988, ISO 8690 was adopted as an internationally accepted method of examination (technically identical to DIN 25 415, Part 1). A first range of coatings for nuclear applications were compiled from the large number of commercial products available on the market on the basis of the test method developed since 1962 at the Karlsruhe Nuclear Research Center and then at the Karlsruhe Research Center. Subsequently, the continuously improved test method was used to study, in mainly chemically curing two-component coatings, the reduction of gloss by dulling agents and fillers as well as various shades of color. Floor and container coatings were also examined for their resistance to radiation and to chemicals as well as wear. (orig.) [de

  3. Hot Structure Control Surface Progress for X-37 Technology Development Program

    Science.gov (United States)

    Valentine, P. G.; Meyer, David L. (Editor); Snow, Holly (Editor)

    2004-01-01

    The NASA Marshall Space Flight Center (MSFC) has been leading the development of technologies that will enable the development, fabrication, and flight of the automated X-37 Orbital Vehicle (OV). With the Administration s recent announcement of the Vision for Space Exploration, NASA placed the X-37 OV design on hold while developing detailed requirements for a Crew Exploration Vehicle, but has continued funding the development of high-risk, critical technologies for potential future space exploration vehicle applications. Hot Structure Control Surfaces (HSCS) technology development is one of the high-priority areas being funded at this time. The goal of HSCS research is to mitigate risk by qualifying the lightest possible components that meet the stringent X-37 OV weight and performance requirements, including Shuttle-type reen- try environments with peak temperatures of 2800 OF. The small size of the X-37 OV (25.7-feet long and 14.9-foot wingspan) drives the need for advanced HSCS because the vehicle's two primary aerodynamic surfaces, the flaperons and ruddervators, have thicknesses ranging from approximately 5 in. down to 1 in. Traditional metallic or polymer-matrix composites covered with tile or blanket thermal protection system (TPS) materials cannot be used as there is insufficient volume to fabricate such multi-component structures. Therefore, carbon-carbon (C-C) and carbodsilicon-carbide (C-SiC) composite HSCS structures are being developed in parallel by two teams supporting the X-37 prime contractor (The Boeing Company). The Science Applications International Coy. (SAIC) and Carbon-Carbon Advanced Technologies, Inc. (C-CAT) team is developing the C-C HSCS, while the General Electric Energy Power Systems Composites (GE-PSC) and Materials Research and Design (MRD) team is developing the C-SiC HSCS. These two teams were selected to reduce the high level of risk associated with developing advanced control surface components. They have continued HSCS

  4. Development of a gas microvalve based on fine and micromachining

    NARCIS (Netherlands)

    Fazal, I.

    2007-01-01

    The work presented in this thesis is generated in the frame of the project “Micro and Miniaturized Flow Controller for Gas Chromatography�? financially supported by the Dutch Technology Foundation (STW). The aim of the project is to develop a miniature instrument for the control of gas flow

  5. Testing of an Annular Linear Induction Pump for the Fission Surface Power Technology Demonstration Unit

    Science.gov (United States)

    Polzin, K. A.; Pearson, J. B.; Webster, K.; Godfoy, T. J.; Bossard, J. A.

    2013-01-01

    Results of performance testing of an annular linear induction pump that has been designed for integration into a fission surface power technology demonstration unit are presented. The pump electromagnetically pushes liquid metal (NaK) through a specially-designed apparatus that permits quantification of pump performance over a range of operating conditions. Testing was conducted for frequencies of 40, 55, and 70 Hz, liquid metal temperatures of 125, 325, and 525 C, and input voltages from 30 to 120 V. Pump performance spanned a range of flow rates from roughly 0.3 to 3.1 L/s (4.8 to 49 gpm), and pressure heads of <1 to 104 kPa (<0.15 to 15 psi). The maximum efficiency measured during testing was 5.4%. At the technology demonstration unit operating temperature of 525 C the pump operated over a narrower envelope, with flow rates from 0.3 to 2.75 L/s (4.8 to 43.6 gpm), developed pressure heads from <1 to 55 kPa (<0.15 to 8 psi), and a maximum efficiency of 3.5%. The pump was supplied with three-phase power at 40 and 55 Hz using a variable-frequency motor drive, while power at 55 and 70 Hz was supplied using a variable-frequency power supply. Measured performance of the pump at 55 Hz using either supply exhibited good quantitative agreement. For a given temperature, the peak in efficiency occurred at different flow rates as the frequency was changed, but the maximum value of efficiency was relative insensitive within 0.3% over the frequency range tested, including a scan from 45 to 78 Hz. The objectives of the FSP technology project are as follows:5 • Develop FSP concepts that meet expected surface power requirements at reasonable cost with added benefits over other options. • Establish a nonnuclear hardware-based technical foundation for FSP design concepts to reduce overall development risk. • Reduce the cost uncertainties for FSP and establish greater credibility for flight system cost estimates. • Generate the key nonnuclear products to allow Agency

  6. [Response surface method optimize of nano-silica solid dispersion technology assistant enzymatic hydrolysis preparation genistein].

    Science.gov (United States)

    Jin, Xin; Zhang, Zhen-Hai; Zhu, Jing; Sun, E; Yu, Dan-Hong; Chen, Xiao-Yun; Liu, Qi-Yuan; Ning, Qing; Jia, Xiao-Bin

    2012-04-01

    This article reports that nano-silica solid dispersion technology was used to raise genistein efficiency through increasing the enzymatic hydrolysis rate. Firstly, genistin-nano-silica solid dispersion was prepared by solvent method. And differential scanning calorimetry (DSC) and transmission electron microscopy (TEM) were used to verify the formation of solid dispersion, then enzymatic hydrolysis of solid dispersion was done by snailase to get genistein. With the conversion of genistein as criteria, single factor experiments were used to study the different factors affecting enzymatic hydrolysis of genistin and its solid dispersion. And then, response surface method was used to optimize of nano-silica solid dispersion technology assistant enzymatic hydrolysis. The optimum condition to get genistein through enzymatic hydrolysis of genistin-nano-silica solid dispersion was pH 7.1, temperature 52.2 degrees C, enzyme concentration 5.0 mg x mL(-1) and reaction time 7 h. Under this condition, the conversion of genistein was (93.47 +/- 2.40)%. Comparing with that without forming the genistin-nano-silica solid dispersion, the conversion increased 2.62 fold. At the same time, the product of hydrolysis was purified to get pure genistein. The method of enzymatic hydrolysis of genistin-nano-silica solid dispersion by snailase to obtain genistein is simple, efficiency and suitable for the modern scale production.

  7. Adaptable Deployable Entry & Placement Technology (ADEPT) for Cubesat Delivery to Mars Surface

    Science.gov (United States)

    Wercinski, Paul

    2014-01-01

    The Adaptable, Deployable Entry and Placement Technology (ADEPT), uses a mechanical skeleton to deploy a revolutionary carbon fabric system that serves as both heat shield and primary structure during atmospheric entry. The NASA ADEPT project, currently funded by the Game Changing Development Program in STMD is currently focused on 1m class hypersonic decelerators for the delivery of very small payloads ( 5 kg) to locations of interest in an effort to leverage low-cost platforms to rapidly mature the technology while simultaneously delivering high-value science. Preliminary mission design and aerothermal performance testing in arcjets have shown the ADEPT system is quite capable of safe delivery of cubesats to Mars surface. The ability of the ADEPT to transit to Mars in a stowed configuration (similar to an umbrella) provides options for integration with the Mars 2020 cruise stage, even to consider multiple ADEPTs. System-level test campaigns are underway for FY15 execution or planning for FY16. These include deployment testing, wind tunnel testing, system-level arc jet testing, and a sounding rocket flight test. The goal is system level maturation (TRL 6) at a 1m class Mars design reference mission configuration.

  8. A review of the biomaterials technologies for infection-resistant surfaces.

    Science.gov (United States)

    Campoccia, Davide; Montanaro, Lucio; Arciola, Carla Renata

    2013-11-01

    Anti-infective biomaterials need to be tailored according to the specific clinical application. All their properties have to be tuned to achieve the best anti-infective performance together with safe biocompatibility and appropriate tissue interactions. Innovative technologies are developing new biomaterials and surfaces endowed with anti-infective properties, relying either on antifouling, or bactericidal, or antibiofilm activities. This review aims at thoroughly surveying the numerous classes of antibacterial biomaterials and the underlying strategies behind them. Bacteria repelling and antiadhesive surfaces, materials with intrinsic antibacterial properties, antibacterial coatings, nanostructured materials, and molecules interfering with bacterial biofilm are considered. Among the new strategies, the use of phages or of antisense peptide nucleic acids are discussed, as well as the possibility to modulate the local immune response by active cytokines. Overall, there is a wealth of technical solutions to contrast the establishment of an implant infection. Many of them exhibit a great potential in preclinical models. The lack of well-structured prospective multicenter clinical trials hinders the achievement of conclusive data on the efficacy and comparative performance of anti-infective biomaterials. © 2013 Elsevier Ltd. All rights reserved.

  9. The industrial logistic surface: Displaying the impact of energy policy on uptake of new technologies

    International Nuclear Information System (INIS)

    Mathews, John A.; Baroni, Paolo

    2013-01-01

    Two processes are widely viewed as fundamental to the transition from conventional fossil-fuelled energy systems to renewable powered systems that is under way. There is firstly the progressive reduction in costs as investment, or production/energy generating capacity, grows. To see the uptake itself we need a second process, captured as a logistic curve (or S-shaped curve) that depicts the uptake of the new technology as an industrial substitution process unfolding over time. In this paper we put these two processes together, deriving a single expression that depicts uptake as a function of both cumulative investment and time, where the key parameter can be related to the learning coefficient. We display this expression in the form of a 3-dimensional surface that we dub the Logistic Industrial Surface. It is applied to a real case involving cost reduction and logistic uptake of solar PV (photovoltaic) cells. In this specific case, we estimate the learning curve involved and on this basis calculate that (for an initial time period) early in the trajectory a cost reduction of 8.7% would be associated with an increase in investment of 10%, leading to an increase in uptake by 4.35%; whereas a cost reduction of 44% (corresponding to a doubling of investment) would lead to a more rapid uptake of 41.95%. We claim that this is the first demonstration in the literature of a direct connection between investment levels, cost reductions and consequent levels of uptake according to logistic industrial dynamics. - Highlights: • We derive an expression which combines learning curves with logistic uptake. • This expression is termed an ILS (industrial logistic surface). • We illustrate the ILS through different investment schedules. • We apply the new framework to the case of solar PV cost reductions and uptake. • We demonstrate the workings of the ILS with a numerical example

  10. Applying of the array transducers' technology for surface acoustic waves materials characterization in the transient regime

    International Nuclear Information System (INIS)

    Frenet, D.

    2000-01-01

    In this document we present a theoretical and experimental study which has been led to design a surface acoustic wave device for local characterisation (relatively to the wavelength) of isotropic or anisotropic materials. The device is based on a phased-array transducer of conical shape we have specifically designed for this purpose. It operates in the impulsive mode, in the frequency range of 1-5 MHz. In order to deduce mechanical properties of the material, it is possible to measure the surface wave characteristics (velocity, attenuation,...). Different methods for measuring the wave velocity have been developed taking advantage of from the phased-array technology. The originality of theses methods relies on the fact that the measures are performed without moving the transducer. Consequently, the device requires no additional mechanical system and it is quite compact. In addition, this shortens the characterisation process duration comparatively to the usually available methods (e. g. the V(z) technique). In the theoretical section of this study, a versatile model allowing to simulate in the time harmonic regime as well as in the transient regime, the transmitted field, the field reflected on isotropic or anisotropic planar samples and the output voltage for transducers of arbitrary shapes has been developed. The model has been applied to the phased-array conical transducer as well as to more classical transducers such as planar (rectangular) or focusing (spherically or cylindrically shaped) transducers. It predicts not only the geometrical contributions of the reflected field and signal but also the leaky contributions related to the surface acoustic waves. (author)

  11. Micromachining for Si etching using CW CO_2 laser

    International Nuclear Information System (INIS)

    Al-Hawat, Sh.; Naddaf, M.; Al-Sadat, W.; Wiess, Sh.

    2015-01-01

    Many experiments were carried out to achieve etching for silicon samples located on glass substrate (Pyrex or Quartz) using CW CO_2 laser under treating conditions which were in the case of linear scanning as: the power was 35-47 W, the number of round trips was 10-60 and the linear scanning speed was 17-75 mm/s, and in the case of fixed sample they were as: the power was 40 W and the exposure time was between 2-6 min. The obtained results were different depending on the form of etching and its quality, according to the applied treating conditions on the silicon samples, taking the treated silicon surface attached directly to the glass substrate surface or taking the opposite side of the silicon sample. The etching of the first type was easy to get, but the second one was more difficult to obtain, which requires very strong conditions. The best of these results were recorded using a quartz substrate under treating conditions: the laser power was 42.5 W, the number of round trips was 30, and the scanning speed was 75 mm/s, so the etching was limited to separate spots produced on the surface of the sample. In the all cases, the pictures of spots and lines formed on treated Si samples were taken using scanning electron microscope (SEM) for both sides of the studied samples.(author)

  12. Micromachining for Si etching using CW CO 2 laser

    International Nuclear Information System (INIS)

    Hawat, Sh.; Naddaf, M.; Al-Sadat, W.; Weiss, Sh.

    2012-08-01

    Many experiments were carried out to achieve etching for silicon samples located on glass substrate (Pyrex or Quartz) using Cw CO 2 laser under treating conditions which were in the case of linear scanning as: the power was 35-47 W, the number of round trips was 10-60 and the linear scanning speed was 17-75 mm/s, and in the case of fixed sample they were as: the power was 40 W and the exposure time was between 2-6 min. The obtained results were different depending on the form of etching and its quality, according to the applied treating conditions on the silicon samples, taking the treated silicon surface attached directly to the glass substrate surface or taking the opposite side of the silicon sample. The etching of the first type was easy to get, but the second one was more difficult to obtain, which requires very strong conditions. The best of these results were recorded using a quartz substrate under treating conditions: the laser power was 42.5 W, the number of round trips was 30, and the scanning speed was 75 mm/s, so the etching was limited to separate spots produced on the surface of the sample. In the all cases, the pictures of spots and lines formed on treated Si samples were taken using scanning electron microscope (SEM) for both sides of the studied samples. (authors)

  13. About the non-identity of the technological impact upon its repeat realization in the case of surface plastic deformation

    Energy Technology Data Exchange (ETDEWEB)

    Grigorov, Veselin I. [University of Rousse, Rousse (Bulgaria)

    2013-07-01

    Discussed are the cases when during the repeated applying surface plastic deformation (SPD) there is a significant manifestation of alternative combinations and otter effect and factors in addition to the factor number of processing runs. Then there are signs of non-identity of their technological impact. except for the influence of the factor frequency of the processing, there are a significant availability of alternative combinations of effects and other factors and there are signs of non-identity of the technological impact. Such combinations occur in relation to: mismatch of the overlaying of contact zones; generation random characteristics of the technological impact; System-driven differences in the condition of contact interaction between the deforming elements and the machined surfaces. Key words: surface plastic deformation.

  14. Arrayed architectures for multi-stage Si-micromachined high-flow Knudsen pumps

    International Nuclear Information System (INIS)

    Qin, Yutao; An, Seungdo; Gianchandani, Yogesh B

    2015-01-01

    This paper reports an evaluation and a comparison of two architectures for implementing Si-micromachined high-flow Knudsen pumps. Knudsen pumps, which operate on the principle of thermal transpiration, have been shown to have great promise for micro-scale gas phase fluidic systems such as micro gas chromatographs. Simultaneously achieving both a high flow rate and adequate blocking pressure has been a persistent challenge, which is addressed in this work by combining multiple pumps in series and addressing the resulting challenges in thermal management. The basic building block is a Si-micromachined pump with  ≈100 000 parallel channels in a 4 mm  ×  6 mm footprint. In the primary approach, multiple pump stages are stacked vertically with interleaved Si-micromachined spacers. A stacked 4-stage Knudsen pump has a form factor of 10 mm  ×  8 mm  ×  6 mm. In an alternate approach, multiple stages are arranged in a planar array. The experimental results demonstrate multiplication of the output pressure head with the number of stages, while the flow rate is maintained. For example, a stacked 4-stage Knudsen pump with 8 W power operated at atmospheric pressure provided a blocking pressure of 0.255 kPa, which was 3.6  ×  of that provided by a single-stage pump with 2 W power; while both provided a  ≈  30 sccm maximum flow rate. The performance can be customized for practical applications such as micro gas chromatography. (paper)

  15. Femtosecond laser 3D micromachining for microfluidic and optofluidic applications

    CERN Document Server

    Sugioka, Koji

    2013-01-01

    Femtosecond lasers opened up new avenue in materials processing due to its unique features of ultrashort pulse width and extremely high peak intensity. One of the most important features of femtosecond laser processing is that strong absorption can be induced even by materials which are transparent to the femtosecond laser beam due to nonlinear multiphoton absorption. The multiphoton absorption allows us to perform not only surface but also three-dimensionally internal microfabrication of transparent materials such as glass. This capability makes it possible to directly fabricate three-dimensi

  16. Project: Micromachined High-Frequency Circuits For Sub-mm-wave Sensors

    Science.gov (United States)

    Papapolymerou, Ioannis John

    2004-01-01

    A novel micromachined resonator at 45 GHz based on a defect in a periodic electromagnetic bandgap structure (EBG) and a two-pole Tchebysbev filter with 1.4% 0.15 dB equiripple bandwidth and 2.3 dB loss employing this resonator are presented in this letter. The periodic bandgap structure is realized on a 400 micron thick high-resistivity silicon wafer using deep reactive ion etching techniques. The resonator and filter can be accessed via coplanar waveguide feeds.

  17. Nickel silicide thin films as masking and structural layers for silicon bulk micro-machining by potassium hydroxide wet etching

    International Nuclear Information System (INIS)

    Bhaskaran, M; Sriram, S; Sim, L W

    2008-01-01

    This paper studies the feasibility of using titanium and nickel silicide thin films as mask materials for silicon bulk micro-machining. Thin films of nickel silicide were found to be more resistant to wet etching in potassium hydroxide. The use of nickel silicide as a structural material, by fabricating micro-beams of varying dimensions, is demonstrated. The micro-structures were realized using these thin films with wet etching using potassium hydroxide solution on (1 0 0) and (1 1 0) silicon substrates. These results show that nickel silicide is a suitable alternative to silicon nitride for silicon bulk micro-machining

  18. Numerical modelling of micro-machining of f.c.c. single crystal: Influence of strain gradients

    KAUST Repository

    Demiral, Murat

    2014-11-01

    A micro-machining process becomes increasingly important with the continuous miniaturization of components used in various fields from military to civilian applications. To characterise underlying micromechanics, a 3D finite-element model of orthogonal micro-machining of f.c.c. single crystal copper was developed. The model was implemented in a commercial software ABAQUS/Explicit employing a user-defined subroutine VUMAT. Strain-gradient crystal-plasticity and conventional crystal-plasticity theories were used to demonstrate the influence of pre-existing and evolved strain gradients on the cutting process for different combinations of crystal orientations and cutting directions. Crown Copyright © 2014.

  19. A versatile multi-user polyimide surface micromachinning process for MEMS applications

    KAUST Repository

    Carreno, Armando Arpys Arevalo

    2015-04-01

    This paper reports a versatile multi-user micro-fabrication process for MEMS devices, the \\'Polyimide MEMS Multi-User Process\\' (PiMMPs). The reported process uses polyimide as the structural material and three separate metallization layers that can be interconnected depending on the desired application. This process enables for the first time the development of out-of-plane compliant mechanisms that can be designed using six different physical principles for actuation and sensing on a wafer from a single fabrication run. These principles are electrostatic motion, thermal bimorph actuation, capacitive sensing, magnetic sensing, thermocouple-based sensing and radio frequency transmission and reception. © 2015 IEEE.

  20. Integration of microplasma and microfluidic technologies for localised microchannel surface modification

    Science.gov (United States)

    Szili, Endre J.; Al-Bataineh, Sameer A.; Priest, Craig; Gruner, Philipp J.; Ruschitzka, Paul; Bradley, James W.; Ralston, John; Steele, David A.; Short, Robert D.

    2011-12-01

    In this paper we describe the spatial surface chemical modification of bonded microchannels through the integration of microplasmas into a microfluidic chip (MMC). The composite MMC comprises an array of precisely aligned electrodes surrounding the gas/fluid microchannel. Pairs of electrodes are used to locally ignite microplasmas inside the microchannel. Microplasmas, comprising geometrically confined microscopic electrically-driven gas discharges, are used to spatially functionalise the walls of the microchannels with proteins and enzymes down to scale lengths of 300 μm inside 50 μm-wide microchannels. Microchannels in poly(dimethylsiloxane) (PDMS) or glass were used in this study. Protein specifically adsorbed on to the regions inside the PDMS microchannel that were directly exposed to the microplasma. Glass microchannels required pre-functionalisation to enable the spatial patterning of protein. Firstly, the microchannel wall was functionalised with a protein adhesion layer, 3-aminopropyl-triethoxysilane (APTES), and secondly, a protein blocking agent (bovine serum albumin, BSA) was adsorbed onto APTES. The functionalised microchannel wall was then treated with an array of spatially localised microplasmas that reduced the blocking capability of the BSA in the region that had been exposed to the plasma. This enabled the functionalisation of the microchannel with an array of spatially separated protein. As an alternative we demonstrated the feasibility of depositing functional thin films inside the MMC by spatially plasma depositing acrylic acid and 1,7-octadiene within the microchannel. This new MMC technology enables the surface chemistry of microchannels to be engineered with precision, which is expected to broaden the scope of lab-on-a-chip type applications.

  1. Finite element modeling of micromachined MEMS photon devices

    Science.gov (United States)

    Evans, Boyd M., III; Schonberger, D. W.; Datskos, Panos G.

    1999-09-01

    The technology of microelectronics that has evolved over the past half century is one of great power and sophistication and can now be extended to many applications (MEMS and MOEMS) other than electronics. An interesting application of MEMS quantum devices is the detection of electromagnetic radiation. The operation principle of MEMS quantum devices is based on the photoinduced stress in semiconductors, and the photon detection results from the measurement of the photoinduced bending. These devices can be described as micromechanical photon detectors. In this work, we have developed a technique for simulating electronic stresses using finite element analysis. We have used our technique to model the response of micromechanical photon devices to external stimuli and compared these results with experimental data. Material properties, geometry, and bimaterial design play an important role in the performance of micromechanical photon detectors. We have modeled these effects using finite element analysis and included the effects of bimaterial thickness coating, effective length of the device, width, and thickness.

  2. Finite Element Modeling of Micromachined MEMS Photon Devices

    International Nuclear Information System (INIS)

    Datskos, P.G.; Evans, B.M.; Schonberger, D.

    1999-01-01

    The technology of microelectronics that has evolved over the past half century is one of great power and sophistication and can now be extended to many applications (MEMS and MOEMS) other than electronics. An interesting application of MEMS quantum devices is the detection of electromagnetic radiation. The operation principle of MEMS quantum devices is based on the photoinduced stress in semiconductors, and the photon detection results from the measurement of the photoinduced bending. These devices can be described as micromechanical photon detectors. In this work, we have developed a technique for simulating electronic stresses using finite element analysis. We have used our technique to model the response of micromechanical photon devices to external stimuli and compared these results with experimental data. Material properties, geometry, and bimaterial design play an important role in the performance of micromechanical photon detectors. We have modeled these effects using finite element analysis and included the effects of bimaterial thickness coating, effective length of the device, width, and thickness

  3. Preparation of Copper and Chromium Alloyed Layers on Pure Titanium by Plasma Surface Alloying Technology

    Science.gov (United States)

    He, Xiaojing; Li, Meng; Wang, Huizhen; Zhang, Xiangyu; Tang, Bin

    2015-05-01

    Cu-Cr alloyed layers with different Cu and Cr contents on pure titanium were obtained by means of plasma surface alloying technology. The microstructure, chemical composition and phase composition of Cu-Cr alloyed layers were analyzed by scanning electron microscopy (SEM), energy dispersive spectrometer (EDS) and X-ray diffraction (XRD), respectively. The experimental results demonstrate that the alloyed layers are bonded strongly to pure titanium substrate and consist of unbound Ti, CuTi, Cu3Ti, CuTi3 and Cr2Ti. The thickness of Cu5Cr5 and Cu7Cr3 alloyed layer are about 18 μm and 28 μm, respectively. The antibacterial properties against gram-negative Escherichia coli (E.coli, ATCC10536) and gram-positive Staphylococcus aureus (S. aureus, ATCC6538) of untreated pure titanium and Cu-Cr alloyed specimen were investigated by live/dead fluorescence staining method. The study shows that Cu-Cr alloyed layers exhibit excellent antibacterial activities against both E.coli and S.aureus within 24 h, which may be attributed to the formation of Cu-containing phases.

  4. Evaluation of Surface Cleaning Procedures for CTGS Substrates for SAW Technology with XPS

    Directory of Open Access Journals (Sweden)

    Erik Brachmann

    2017-11-01

    Full Text Available A highly efficient and reproducible cleaning procedure of piezoelectric substrates is essential in surface acoustic waves (SAW technology to fabricate high-quality SAW devices, especially for new applications such SAW sensors wherein new materials for piezoelectric substrates and interdigital transducers are used. Therefore, the development and critical evaluation of cleaning procedures for each material system that is under consideration becomes crucial. Contaminants like particles or the presence of organic/inorganic material on the substrate can dramatically influence and alter the properties of the thin film substrate composite, such as wettability, film adhesion, film texture, and so on. In this article, focus is given to different cleaning processes like SC-1 and SC-2, UV-ozone treatment, as well as cleaning by first-contact polymer Opticlean, which are applied for removal of contaminants from the piezoelectric substrate Ca 3 TaGa 3 Si 2 O 14 . By means of X-ray photoelectron spectroscopy, the presence of the most critical contaminants such as carbon, sodium, and iron removed through different cleaning procedures were studied and significant differences were observed between the outcomes of these procedures. Based on these results, a two-step cleaning process, combining SC-1 at a reduced temperature at 30 ∘ C instead of 80 ∘ C and a subsequent UV-ozone cleaning directly prior to deposition of the metallization, is suggested to achieve the lowest residual contamination level.

  5. Bayesian Estimation of the Active Concentration and Affinity Constants Using Surface Plasmon Resonance Technology.

    Directory of Open Access Journals (Sweden)

    Feng Feng

    Full Text Available Surface plasmon resonance (SPR has previously been employed to measure the active concentration of analyte in addition to the kinetic rate constants in molecular binding reactions. Those approaches, however, have a few restrictions. In this work, a Bayesian approach is developed to determine both active concentration and affinity constants using SPR technology. With the appropriate prior probabilities on the parameters and a derived likelihood function, a Markov Chain Monte Carlo (MCMC algorithm is applied to compute the posterior probability densities of both the active concentration and kinetic rate constants based on the collected SPR data. Compared with previous approaches, ours exploits information from the duration of the process in its entirety, including both association and dissociation phases, under partial mass transport conditions; do not depend on calibration data; multiple injections of analyte at varying flow rates are not necessary. Finally the method is validated by analyzing both simulated and experimental datasets. A software package implementing our approach is developed with a user-friendly interface and made freely available.

  6. Dual Comb Unit High-g Accelerometer Based on CMOS-MEMS Technology

    Directory of Open Access Journals (Sweden)

    Mehrdad Mottaghi

    2009-04-01

    Full Text Available In this paper a capacitive based high-g accelerometer with superior level of sensitivity is presented. It takes advantage of dual comb unit configuration and surface micromachining fabrication process. All aspects of mechanical design such as sensor structure, modal analysis, energy dissipations, dynamic response and stresses in moving structure as well as anchors are described. Electrical circuit based on CMOS technology and its output signal is presented. Fabrication process and packaging are also discussed. The proposed sensor can endure impact loads up to 120,000 g (g = 9.81 m.s-2 and achieves 16.75 µV.g-1 sensitivity with 5 V bridge excitation voltage. Main resonant frequency of structure is found to be 42.4 kHz. Intended applications of suggested sensor include military and aerospace industries as well as field of impact engineering.

  7. Synthesis and structure of large single crystalline silver hexagonal microplates suitable for micromachining

    Energy Technology Data Exchange (ETDEWEB)

    Lyutov, Dimitar L.; Genkov, Kaloyan V.; Zyapkov, Anton D.; Tsutsumanova, Gichka G.; Tzonev, Atanas N. [Department of Solid State Physics and Microelectronics, Faculty of Physics, University of Sofia, 5, J. Bouchier Blvd, Sofia (Bulgaria); Lyutov, Lyudmil G. [Department of General and Inorganic Chemistry, Faculty of Chemistry, University of Sofia, 1, J. Bouchier Blvd, Sofia (Bulgaria); Russev, Stoyan C., E-mail: scr@phys.uni-sofia.bg [Department of Solid State Physics and Microelectronics, Faculty of Physics, University of Sofia, 5, J. Bouchier Blvd, Sofia (Bulgaria)

    2014-01-15

    We report a simple one-step synthesis method of large single crystalline Ag (111) hexagonal microplates with sharp edges and a size of up to tens of microns. Single silver crystals were produced by reduction silver nitrate aqueous solution with 4-(methylamino)phenol sulfate. Scanning and transmission electron microscopy, energy-dispersive X-ray spectroscopy, selected area electron diffraction and optical microscopy techniques were combined to characterize the crystals. It is shown that the microplates can be easily dispersed and transferred as single objects onto different substrates and subsequently used as a high quality plasmonic starting material for micromachining of future nanocomponents, using modern top-down techniques like focused-ion beam milling and gas injection deposition. - Highlights: • Synthesis of large Ag hexagonal microplates with high crystallinity. • It is shown and discussed the role of twinning for the anisotropic 2D growth. • The Ag plates are stable in water and can be dispersed onto different substrates. • Their positioning and subsequent micromachining with FIB/GIS is demonstrated. • Suitable starting material for future plasmonic nanocomponents.

  8. Millimeter length micromachining using a heavy ion nuclear microprobe with standard magnetic scanning

    International Nuclear Information System (INIS)

    Nesprías, F.; Debray, M.E.; Davidson, J.; Kreiner, A.J.

    2013-01-01

    In order to increase the scanning length of our microprobe, we have developed an irradiation procedure suitable for use in any nuclear microprobe, extending at least up to 400% the length of our heavy ion direct writing facility using standard magnetic exploration. Although this method is limited to patterns of a few millimeters in only one direction, it is useful for the manufacture of curved waveguides, optical devices such Mach–Zehnder modulators, directional couplers as well as channels for micro-fluidic applications. As an example, this technique was applied to the fabrication of 3 mm 3D-Mach–Zehnder modulators in lithium niobate with short Y input/output branches and long shaped parallel-capacitor control electrodes. To extend and improve the quality of the machined structures we developed new scanning control software in LabView™ platform. The new code supports an external dose normalization, electrostatic beam blanking and is capable of scanning figures at 16 bit resolution using a National Instruments™ PCI-6731 High-Speed I/O card. A deep and vertical micromachining process using swift 35 Cl ions 70 MeV bombarding energy and direct write patterning was performed on LiNbO 3 , a material which exhibits a strong natural anisotropy to conventional etching. The micromachined structures show the feasibility of this method for manufacturing micro-fluidic channels as well

  9. Millimeter length micromachining using a heavy ion nuclear microprobe with standard magnetic scanning

    Energy Technology Data Exchange (ETDEWEB)

    Nesprías, F. [Gerencia de Investigación y Aplicaciones, Comisión Nacional de Energía Atómica, Av. Gral Paz 1499 (1650), San Martín, Buenos Aires (Argentina); Debray, M.E., E-mail: debray@tandar.cnea.gov.ar [Gerencia de Investigación y Aplicaciones, Comisión Nacional de Energía Atómica, Av. Gral Paz 1499 (1650), San Martín, Buenos Aires (Argentina); Escuela de Ciencia y Tecnología. Universidad Nacional de Gral. San Martín, M. De Irigoyen 3100 (1650), San Martín, Buenos Aires (Argentina); Davidson, J. [Gerencia de Investigación y Aplicaciones, Comisión Nacional de Energía Atómica, Av. Gral Paz 1499 (1650), San Martín, Buenos Aires (Argentina); CONICET, Avda. Rivadavia 1917 (C1033AAJ), Ciudad Autónoma de Buenos Aires (Argentina); Kreiner, A.J. [Gerencia de Investigación y Aplicaciones, Comisión Nacional de Energía Atómica, Av. Gral Paz 1499 (1650), San Martín, Buenos Aires (Argentina); Escuela de Ciencia y Tecnología. Universidad Nacional de Gral. San Martín, M. De Irigoyen 3100 (1650), San Martín, Buenos Aires (Argentina); CONICET, Avda. Rivadavia 1917 (C1033AAJ), Ciudad Autónoma de Buenos Aires (Argentina); and others

    2013-04-01

    In order to increase the scanning length of our microprobe, we have developed an irradiation procedure suitable for use in any nuclear microprobe, extending at least up to 400% the length of our heavy ion direct writing facility using standard magnetic exploration. Although this method is limited to patterns of a few millimeters in only one direction, it is useful for the manufacture of curved waveguides, optical devices such Mach–Zehnder modulators, directional couplers as well as channels for micro-fluidic applications. As an example, this technique was applied to the fabrication of 3 mm 3D-Mach–Zehnder modulators in lithium niobate with short Y input/output branches and long shaped parallel-capacitor control electrodes. To extend and improve the quality of the machined structures we developed new scanning control software in LabView™ platform. The new code supports an external dose normalization, electrostatic beam blanking and is capable of scanning figures at 16 bit resolution using a National Instruments™ PCI-6731 High-Speed I/O card. A deep and vertical micromachining process using swift {sup 35}Cl ions 70 MeV bombarding energy and direct write patterning was performed on LiNbO{sub 3}, a material which exhibits a strong natural anisotropy to conventional etching. The micromachined structures show the feasibility of this method for manufacturing micro-fluidic channels as well.

  10. A LabVIEWTM-based scanning and control system for proton beam micromachining

    International Nuclear Information System (INIS)

    Bettiol, Andrew A.; Kan, J.A. van; Sum, T.C.; Watt, F.

    2001-01-01

    LabVIEW TM is steadily gaining in popularity as the programming language of choice for scientific data acquisition and control. This is due to the vast array of measurement instruments and data acquisition cards supported by the LabVIEW TM environment, and the relative ease with which advanced software can be programmed. Furthermore, virtual instruments that are designed for a given system can be easily ported to other LabVIEW TM platforms and hardware. This paper describes the new LabVIEW TM based scanning and control system developed specifically for proton beam micromachining (PBM) applications. The new system is capable of scanning figures at 16-bit resolution with improved sub-microsecond scan rates. Support for electrostatic beam blanking and external dose normalization using a TTL signal have been implemented. The new software incorporates a semi-automated dose calibration system, and a number of novel dose normalization methods. Limitations of the current beam scanning hardware are discussed in light of new results obtained from micromachining experiments performed in SU-8 photoresist

  11. Proceedings of national executive management seminar on surface finishing by radiation curing technology: radiation curing for better finishing

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1994-12-31

    This book compiled the paper presented at this seminar. The papers discussed are 1. Incentives for investment in the manufacturing sector (in Malaysia) 2.Trends and prospect of surface finishing by radiation curing technology in Malaysia 3. Industrial application of radiation curing.

  12. Proceedings of national executive management seminar on surface finishing by radiation curing technology: radiation curing for better finishing

    International Nuclear Information System (INIS)

    1993-01-01

    This book compiled the paper presented at this seminar. The papers discussed are 1. Incentives for investment in the manufacturing sector (in Malaysia) 2.Trends and prospect of surface finishing by radiation curing technology in Malaysia 3. Industrial application of radiation curing

  13. A 850 GHz SIS receiver employing silicon micro-machining technology

    Science.gov (United States)

    Kooi, J. W.; Pety, J.; Schaffer, P. L.; Phillips, T. G.; Bumble, B.; LeDuc, H. G.; Walker, C. K.

    1996-01-01

    A 850 GHz superconductor-insulator-superconductor (SIS) heterodyne receiver which uses a radiofrequency tuned niobium tunnel junction fabricated on a 1 micron thick silicon nitrate membrane, is reported. From video and heterodyne measurements, it was calculated that the niobium film loss in the radiofrequency matching network is about 6.8 dB at 822 GHz. These results are approximately a factor of two higher than the theoretical loss predicted by the Mattis-Bardeen theory in the extreme anomalous limit. The junction design and the receiver configuration are described, including the mixer block, the membrane construction and the cooled optics. The performance tests using a Fourier transform spectrometer to measure the response of the radiofrequency matching network, and the SIS simulations of the receiver response to cold and hot loads, the infrared noise contribution and the overall mixer conversion efficiency, are reported. It is concluded that the receiver response is limited by the absorption loss in the radiofrequency matching network.

  14. Erosion resistant anti-ice surfaces generated by ultra short laser pulses

    NARCIS (Netherlands)

    Del Cerro, D.A.; Römer, G.R.B.E.; Huis in't Veld, A.J.

    2010-01-01

    Wetting properties of a wide range of materials can be modified by accurate laser micromachining with ultra short laser pulses. Controlling the surface topography in a micro and sub-micrometer scale allows the generation of water-repellent surfaces, which remain dry and prevent ice accumulation

  15. Technological capabilities of increasing surface quality of workpieces made of titanium alloy VT22 and stability of surface grinding

    Science.gov (United States)

    Soler, Ya I.; Salov, V. M.; Mai, D. S.

    2018-03-01

    Surface grinding of flat workpieces made of alloy VT22 was conducted by the periphery of a highly porous wheel (HPW) from cubic boron nitride CBN30 B107 100 OV K27 КF40 with three processing techniques (ij). They are 10 - cross-feed per stroke, HPW cutting into a workpiece changes alternately from up to down; 12 – cross-feed per double stroke during the up HPW cutting-in at the working stroke; 22 – cross-feed per double stroke during the down HPW cutting-in at the working stroke. With the involvement of artificial neural network models, it was revealed that to improve the quality of surfaces and stability of its formation, grinding should be conducted if ij = 12.

  16. Surface modification of chitin using ultrasound-assisted and supercritical CO{sub 2} technologies for cobalt adsorption

    Energy Technology Data Exchange (ETDEWEB)

    Dotto, Guilherme L., E-mail: guilherme_dotto@yahoo.com.br; Cunha, Jeanine M., E-mail: jeaninecunha@gmail.com; Calgaro, Camila O., E-mail: camila.itepjr@gmail.com; Tanabe, Eduardo H., E-mail: edutanabe@yahoo.com.br; Bertuol, Daniel A., E-mail: dbertuol@gmail.com

    2015-09-15

    Highlights: • Chitin was modified by ultrasound-assisted (UA) and supercritical (SCO{sub 2}) technologies. • Chitin, UA-chitin and SCO{sub 2}-chitin were used as adsorbents for Co(II). • UA and SCO{sub 2} treatments provided increase of 20 and 3 times in chitin surface area. • The Co(II) adsorption capacity increased until 67.8%, using UA-chitin. - Abstract: Ultrasound-assisted (UA) and supercritical CO{sub 2} technologies (SCO{sub 2}) were used to modify the chitin surface and, improve its adsorption characteristics regarding to cobalt. Chitin, before and after the treatments, was characterized by N{sub 2} adsorption isotherms (BET), infrared spectroscopy (FT-IR), X-ray diffraction (XRD) and scanning electron microscopy (SEM). Unmodified and surface modified chitins were used as adsorbents to remove cobalt from aqueous solutions. The adsorption study was performed by equilibrium isotherms and kinetic curves. The chitin particle characteristics, such as, surface area, pore volume and porosity were improved by the UA and SCO{sub 2} treatments. The crystallinity index decreased after the UA and SCO{sub 2} treatments, and also, intense surface modifications were observed. Langmuir and Freundlich models were adequate to represent the adsorption equilibrium. The maximum adsorption capacities were 50.03, 83.94 and 63.08 mg g{sup −1} for unmodified chitin, UA surface modified chitin and SCO{sub 2} surface modified chitin. The adsorption kinetic curves were well represented by the pseudo-second order model. UA and SCO{sub 2} technologies are alternatives to modify the chitin surface and improve its adsorption characteristics.

  17. Coal surface control for advanced physical fine coal cleaning technologies. Final report, September 19, 1988--August 31, 1992

    Energy Technology Data Exchange (ETDEWEB)

    Morsi, B.I.; Chiang, S.H.; Sharkey, A.; Blachere, J.; Klinzing, G.; Araujo, G.; Cheng, Y.S.; Gray, R.; Streeter, R.; Bi, H.; Campbell, P.; Chiarlli, P.; Ciocco, M.; Hittle, L.; Kim, S.; Kim, Y.; Perez, L.; Venkatadri, R.

    1992-12-31

    This final report presents the research work carried out on the Coal Surface Control for Advanced Physical Fine Coal Cleaning Technologies project, sponsored by the US Department of Energy, Pittsburgh Energy Technology Center (DOE/PETC). The project was to support the engineering development of the selective agglomeration technology in order to reduce the sulfur content of US coals for controlling SO{sub 2} emissions (i.e., acid rain precursors). The overall effort was a part of the DOE/PETCs Acid Rain Control Initiative (ARCI). The overall objective of the project is to develop techniques for coal surface control prior to the advanced physical fine coal cleaning process of selective agglomeration in order to achieve 85% pyrite sulfur rejection at an energy recovery greater than 85% based on run-of-mine coal. The surface control is meant to encompass surface modification during grinding and laboratory beneficiation testing. The project includes the following tasks: Project planning; methods for analysis of samples; development of standard beneficiation test; grinding studies; modification of particle surface; and exploratory R&D and support. The coal samples used in this project include three base coals, Upper Freeport - Indiana County, PA, Pittsburgh NO. 8 - Belmont County, OH, and Illinois No. 6 - Randolph County, IL, and three additional coals, Upper Freeport - Grant County- WV, Kentucky No. 9 Hopkins County, KY, and Wyodak - Campbell County, WY. A total of 149 drums of coal were received.

  18. Machining the Integral Impeller and Blisk of Aero-Engines: A Review of Surface Finishing and Strengthening Technologies

    Science.gov (United States)

    Fu, Youzhi; Gao, Hang; Wang, Xuanping; Guo, Dongming

    2017-05-01

    The integral impeller and blisk of an aero-engine are high performance parts with complex structure and made of difficult-to-cut materials. The blade surfaces of the integral impeller and blisk are functional surfaces for power transmission, and their surface integrity has significant effects on the aerodynamic efficiency and service life of an aero-engine. Thus, it is indispensable to finish and strengthen the blades before use. This paper presents a comprehensive literature review of studies on finishing and strengthening technologies for the impeller and blisk of aero-engines. The review includes independent and integrated finishing and strengthening technologies and discusses advanced rotational abrasive flow machining with back-pressure used for finishing the integral impeller and blisk. A brief assessment of future research problems and directions is also presented.

  19. Determination of young's modulus of PZT and CO80Ni20 thin films by means of micromachined cantilevers

    NARCIS (Netherlands)

    Nazeer, H.; Abelmann, Leon; Tas, Niels Roelof; van Honschoten, J.W.; Siekman, Martin Herman; Elwenspoek, Michael Curt

    2009-01-01

    This paper presents a technique to determine the Young’s modulus and residual stress of thin films using a simple micromachined silicon cantilever as the test structure. An analytical relation was developed based on the shift in resonance frequency caused by the addition of a thin film on the

  20. Numerical modelling of micro-machining of f.c.c. single crystal: Influence of strain gradients

    KAUST Repository

    Demiral, Murat; Roy, Anish; El Sayed, Tamer S.; Silberschmidt, Vadim V.

    2014-01-01

    of orthogonal micro-machining of f.c.c. single crystal copper was developed. The model was implemented in a commercial software ABAQUS/Explicit employing a user-defined subroutine VUMAT. Strain-gradient crystal-plasticity and conventional crystal

  1. RF Performance of a 600-720 GHz Sideband Separating Mixer with All-Copper Micromachined Waveguide Mixer Block

    NARCIS (Netherlands)

    Mena, F. P.; Kooi, J.; Baryshev, A. M.; Lodewijk, C. F. J.; Klapwijk, T. M.; Wild, W.; Desmaris, V.; Meledin, D.; Pavolotsky, A.; Belitsky, V.; Wild, Wolfgang

    2008-01-01

    Here we report on the RF performance of a 2SB mixer (600-720 GHz) fabricated in a new method that combines traditional micromachining with waveguide components fabricated by photolithography and electroplating. The latter allows reaching, in a reproducible way, the stringent accuracies necessary for

  2. Actinide migration from contaminated soil to surface water at the rocky flats environmental technology site

    International Nuclear Information System (INIS)

    Santschi, Peter H.; Roberts, Kimberly

    2002-01-01

    Surficial soils of the Rocky Flats Environmental Technology Site (RFETS) contain elevated levels of 239,240 Pu and 241 Am due to wind dispersal of soil particles, contaminated in the 1960's by leaking drums stored on the 903 Pad. Over the past 4 years, actinide mobility in the surface environment at RFETS, Golden, Colorado, USA, was examined through field and laboratory experiments. From measurements of total 239,240 Pu and 241 Am concentrations in storm runoff and pond discharge samples, collected during spring and summer times, it was established that most of the actinide transport from contaminated soils to streams occurred in the particulate (0.45μm) and colloidal (3kDa - 0.45μm) phases. Controlled laboratory investigations of soil resuspension, indicated that remobilization of colloid-bound Pu during soil erosion events can be enhanced by humic acids. 2-D Polyacrylamide Gel electrophoresis (PAGE) experiments of radiolabeled colloidal organic and inorganic matter, extracted from RFETS soils, suggested that colloidal Pu, which was focused at pH IEP of 4.5, is mainly associated with organic (humic acids) colloids of 10-15 kDa molecular weight. Pu(IV) oxide and inorganic colloids such as iron and aluminum oxides have pH IEP of 8-10. While some clay minerals also have pH IEP of 3-5, no Al was found coincident with Pu. This finding has important ramifications for possible remediation, erosion controls, and land-management strategies. (author)

  3. A Brief Survey of Media Access Control, Data Link Layer, and Protocol Technologies for Lunar Surface Communications

    Science.gov (United States)

    Wallett, Thomas M.

    2009-01-01

    This paper surveys and describes some of the existing media access control and data link layer technologies for possible application in lunar surface communications and the advanced wideband Direct Sequence Code Division Multiple Access (DSCDMA) conceptual systems utilizing phased-array technology that will evolve in the next decade. Time Domain Multiple Access (TDMA) and Code Division Multiple Access (CDMA) are standard Media Access Control (MAC) techniques that can be incorporated into lunar surface communications architectures. Another novel hybrid technique that is recently being developed for use with smart antenna technology combines the advantages of CDMA with those of TDMA. The relatively new and sundry wireless LAN data link layer protocols that are continually under development offer distinct advantages for lunar surface applications over the legacy protocols which are not wireless. Also several communication transport and routing protocols can be chosen with characteristics commensurate with smart antenna systems to provide spacecraft communications for links exhibiting high capacity on the surface of the Moon. The proper choices depend on the specific communication requirements.

  4. Analysis of the surface technology of silicon detectors for imaging of low-energy beta tracers in biological material

    CERN Document Server

    Tykva, R

    2000-01-01

    Using silicon surface barrier detectors, the counting sensitivity of low-energy beta tracers is considerably influenced by surface technology applied in detector manufacturing. Original diagnostic procedure, using a mixture of uranium fission products, is described to trace the behaviors of different admixtures as in the etching bath as in the water used during development of the detector surface. In combination with some other described analyses, the detectors produced with the developed surface control are used in a PC - controlled scanning equipment reaching at room temperature an FWHM of 3.4 keV for sup 2 sup 4 sup 1 Am. Such detectors make it possible to image distribution, of e.g., sup 3 H, sup 1 sup 2 sup 5 I, sup 3 H+ sup 1 sup 4 C and other beta tracer combinations applied in life and environmental sciences.

  5. AISI/DOE Technology Roadmap Program: Improved Surface Quality of Exposed Automotive Sheet Steels

    Energy Technology Data Exchange (ETDEWEB)

    John G. Speer; David K. Matlock; Noel Meyers; Young-Min Choi

    2002-10-10

    Surface quality of sheet steels is an important economic and technical issue for applications such as critical automotive surfaces. This project was therefore initiated to develop a more quantitative methodology for measuring surface imperfections, and to assess their response to forming and painting, particularly with respect to their visibility or invisibility after painting. The objectives were met, and included evaluation of a variety of imperfections present on commercial sheet surfaces or simulated using methods developed in the laboratory. The results are expected to have significant implications with respect to the methodology for assessing surface imperfections, development of quantitative criteria for surface inspection, and understanding and improving key painting process characteristics that influence the perceived quality of sheet steel surfaces.

  6. Advancing MEMS Technology Usage through the MUMPS (Multi-User MEMS Processes) Program

    Science.gov (United States)

    Koester, D. A.; Markus, K. W.; Dhuler, V.; Mahadevan, R.; Cowen, A.

    1995-01-01

    In order to help provide access to advanced micro-electro-mechanical systems (MEMS) technologies and lower the barriers for both industry and academia, the Microelectronic Center of North Carolina (MCNC) and ARPA have developed a program which provides users with access to both MEMS processes and advanced electronic integration techniques. The four distinct aspects of this program, the multi-user MEMS processes (MUMP's), the consolidated micro-mechanical element library, smart MEMS, and the MEMS technology network are described in this paper. MUMP's is an ARPA-supported program created to provide inexpensive access to MEMS technology in a multi-user environment. It is both a proof-of-concept and educational tool that aids in the development of MEMS in the domestic community. MUMP's technologies currently include a 3-layer poly-silicon surface micromachining process and LIGA (lithography, electroforming, and injection molding) processes that provide reasonable design flexibility within set guidelines. The consolidated micromechanical element library (CaMEL) is a library of active and passive MEMS structures that can be downloaded by the MEMS community via the internet. Smart MEMS is the development of advanced electronics integration techniques for MEMS through the application of flip chip technology. The MEMS technology network (TechNet) is a menu of standard substrates and MEMS fabrication processes that can be purchased and combined to create unique process flows. TechNet provides the MEMS community greater flexibility and enhanced technology accessibility.

  7. Advantages of using microbial technology over traditional chemical technology in removal of black crusts from stone surfaces of historical monuments.

    Science.gov (United States)

    Cappitelli, Francesca; Toniolo, Lucia; Sansonetti, Antonio; Gulotta, Davide; Ranalli, Giancarlo; Zanardini, Elisabetta; Sorlini, Claudia

    2007-09-01

    This study compares two cleaning methods, one involving an ammonium carbonate-EDTA mixture and the other involving the sulfate-reducing bacterium Desulfovibrio vulgaris subsp. vulgaris ATCC 29579, for the removal of black crust (containing gypsum) on marble of the Milan Cathedral (Italy). In contrast to the chemical cleaning method, the biological procedure resulted in more homogeneous removal of the surface deposits and preserved the patina noble under the black crust. Whereas both of the treatments converted gypsum to calcite, allowing consolidation, the chemical treatment also formed undesirable sodium sulfate.

  8. Advantages of Using Microbial Technology over Traditional Chemical Technology in Removal of Black Crusts from Stone Surfaces of Historical Monuments▿

    Science.gov (United States)

    Cappitelli, Francesca; Toniolo, Lucia; Sansonetti, Antonio; Gulotta, Davide; Ranalli, Giancarlo; Zanardini, Elisabetta; Sorlini, Claudia

    2007-01-01

    This study compares two cleaning methods, one involving an ammonium carbonate-EDTA mixture and the other involving the sulfate-reducing bacterium Desulfovibrio vulgaris subsp. vulgaris ATCC 29579, for the removal of black crust (containing gypsum) on marble of the Milan Cathedral (Italy). In contrast to the chemical cleaning method, the biological procedure resulted in more homogeneous removal of the surface deposits and preserved the patina noble under the black crust. Whereas both of the treatments converted gypsum to calcite, allowing consolidation, the chemical treatment also formed undesirable sodium sulfate. PMID:17601804

  9. Structural and technological formation of surface nanostructured Ti-Ni-Mo layers by high-speed gas-flame spraying

    Directory of Open Access Journals (Sweden)

    Blednova Zhesfina

    2015-01-01

    Full Text Available The article covers a complex method of forming surface-modified layers using materials with shape memory effect (SME based on TiNiMo including pre-grinding and mechanical activation of the coating material, high-speed gas-flame spraying of Ni adhesive layer and subsequent TiNiMo spraying with molybdenum content up to 2%, thermal and thermomechanical processing in a single technological cycle. This allowed forming nanostructured surface layers with a high level of functional mechanical and performance properties. We defined control parameters of surface steel modification using material with shape memory effect based on TiNiMo, which monitor the structural material state, both at the stage of spraying, and during subsequent combined treatment, which allows affecting purposefully on the functional properties of the SME surface layer. Test results of samples before coating and after surface modification with TiNiMo in the seawater indicate that surface modification brings to a slower damage accumulation and to increase of steel J91171 endurance limit in seawater by 45%. Based on complex metallophysical research of surface layers we obtained new data about nano-sized composition “steel - Ni - TiNiMo”.

  10. Surface Modification Technology of ODS Alloying Treatment by using Laser Heat Source

    International Nuclear Information System (INIS)

    Kim, H. G.; Kim, I. H.; Choi, B. K.; Park, J. Y.; Koo, Y. H.

    2012-01-01

    The ODS (Oxide Dispersion Strengthed) alloys can be applied as structural materials for components in the core of a nuclear power plants since these components must have a high mechanical strength at high temperature up to 700 .deg. C. This type of alloy was generally manufactured by mechanical alloying from its source metal and Y 2 O 3 powders. The mechanical alloyed powder is subjected to the HIP (Hot Isotatic Pressing) or hot extrusion: and this product is heat treated at target temperature and time. Thus, the Y 2 O 3 particles are dispersed in the metal matrix. These manufacturing process of ODS alloy is very complex and expensive. Also, it is necessary the special techniques to obtain the uniform dispersion and volume control of Y 2 O 3 particles. Another problem is the final product forming such as tube and sheet because the intermediated-product has a high mechanical strength due to the dispersion of Y 2 O 3 particles. The laser cladding techniques was applied on the surface cladding of ceramics and inter-metallic compounds on metal base and ceramic base components to increase corrosion and wear resistance. The laser heat source can be used to the alloying the metal and ceramic materials, because thermally melting of metal and ceramic is possible. So, we are applied on ODS alloy manufacturing by using the laser heat source. The main advantages and disadvantage of this technology can be resumed as follows: · It is possible to apply to the sheet and tube shape component, directly. · Metallurgical damage such as HAZ and severe grain growth is considerably reduced. · Good control of the alloying element of the treated zone · Highly reproducible homogeneous zone · The pores and cracks are suppressed in the treated zone · Oxidation can be prevented during the process. · Good control is possible for the irregular shaped components. · The bulk material alloying is limited by the power of laser source. So, this work is studied on the ODS alloy manufacturing

  11. Double-section curvature tunable functional actuator with micromachined buckle and grid wire for electricity delivery

    Science.gov (United States)

    Feng, Guo-Hua; Hou, Sheng-You

    2015-09-01

    This paper presents an ionic polymer metal composite (IPMC)-driven tentacle-like biocompatible flexible actuator with double-section curvature tunability. This actuator, possessing an embedded electrical transmission ability that mimics skeletal muscle nerves in the human body, affords versatile device functions. Novel micromachined copper buckles and grid wires are fabricated and their superiority in electricity delivery and driving the IPMC component with less flexural rigidity is demonstrated. In addition, soft conductive wires realized on a polydimethylsiloxane structure function as electrical signal transmitters. A light-emitting diode integrated with the developed actuator offers directional guiding light ability while the actuator performs a snake-like motion. The electrical conductivity and Young’s modulus of the key actuator components are investigated, and flexural rigidity and dynamic behavior analyses of the actuator under electrical manipulation are elaborated.

  12. Stability and spring constant investigation for micromachined inductive suspensions: theoretical analysis vs. experimental results

    International Nuclear Information System (INIS)

    Poletkin, K; Lu, Z; Wallrabe, U; Badilita, V; Den Hartogh, B

    2014-01-01

    We present a linear analytical model coupled with experimental analysis to discuss stability of a levitated proof mass (PM) in a micromachined inductive suspension (MIS), which has been previously introduced and characterized. The model is a function of the MIS geometry, describes the dynamics of a levitated disk-shaped PM near the equilibrium point, and predicts conditions for stable levitation. The experimental setup directly measures the lateral component of the Lorentz force, which has a stabilization role in the MIS structure, as well as the vertical levitation force. The experimental setup is further used to derive mechanical parameters such as stiffness values relative to lateral, vertical and angular displacements, proven to be in excellent agreement with the values predicted by the analytical model

  13. Multifrequency Excitation Method for Rapid and Accurate Dynamic Test of Micromachined Gyroscope Chips

    Directory of Open Access Journals (Sweden)

    Yan Deng

    2014-10-01

    Full Text Available A novel multifrequency excitation (MFE method is proposed to realize rapid and accurate dynamic testing of micromachined gyroscope chips. Compared with the traditional sweep-frequency excitation (SFE method, the computational time for testing one chip under four modes at a 1-Hz frequency resolution and 600-Hz bandwidth was dramatically reduced from 10 min to 6 s. A multifrequency signal with an equal amplitude and initial linear-phase-difference distribution was generated to ensure test repeatability and accuracy. The current test system based on LabVIEW using the SFE method was modified to use the MFE method without any hardware changes. The experimental results verified that the MFE method can be an ideal solution for large-scale dynamic testing of gyroscope chips and gyroscopes.

  14. Micro-machined high-frequency (80 MHz) PZT thick film linear arrays.

    Science.gov (United States)

    Zhou, Qifa; Wu, Dawei; Liu, Changgeng; Zhu, Benpeng; Djuth, Frank; Shung, K

    2010-10-01

    This paper presents the development of a micromachined high-frequency linear array using PZT piezoelectric thick films. The linear array has 32 elements with an element width of 24 μm and an element length of 4 mm. Array elements were fabricated by deep reactive ion etching of PZT thick films, which were prepared from spin-coating of PZT sol-gel composite. Detailed fabrication processes, especially PZT thick film etching conditions and a novel transferring-and-etching method, are presented and discussed. Array designs were evaluated by simulation. Experimental measurements show that the array had a center frequency of 80 MHz and a fractional bandwidth (-6 dB) of 60%. An insertion loss of -41 dB and adjacent element crosstalk of -21 dB were found at the center frequency.

  15. Double-section curvature tunable functional actuator with micromachined buckle and grid wire for electricity delivery

    International Nuclear Information System (INIS)

    Feng, Guo-Hua; Hou, Sheng-You

    2015-01-01

    This paper presents an ionic polymer metal composite (IPMC)-driven tentacle-like biocompatible flexible actuator with double-section curvature tunability. This actuator, possessing an embedded electrical transmission ability that mimics skeletal muscle nerves in the human body, affords versatile device functions. Novel micromachined copper buckles and grid wires are fabricated and their superiority in electricity delivery and driving the IPMC component with less flexural rigidity is demonstrated. In addition, soft conductive wires realized on a polydimethylsiloxane structure function as electrical signal transmitters. A light-emitting diode integrated with the developed actuator offers directional guiding light ability while the actuator performs a snake-like motion. The electrical conductivity and Young’s modulus of the key actuator components are investigated, and flexural rigidity and dynamic behavior analyses of the actuator under electrical manipulation are elaborated. (paper)

  16. Bending-induced electromechanical coupling and large piezoelectric response in a micromachined diaphragm

    KAUST Repository

    Wang, Zhihong

    2013-11-04

    We investigated the dependence of electromechanical coupling and the piezoelectric response of a micromachined Pb(Zr 0.52 Ti 0.48)O 3 (PZT) diaphragm on its curvature by observing the impedance spectrum and central deflection responses to a small AC voltage. The curvature of the diaphragm was controlled by applying air pressure to its back. We found that a depolarized flat diaphragm does not initially exhibit electromechanical coupling or the piezoelectric response. However, upon the application of static air pressure to the diaphragm, both electromechanical coupling and the piezoelectric response can be induced in the originally depolarized diaphragm. The piezoelectric response increases as the curvature increases and a giant piezoelectric response can be obtained from a bent diaphragm. The obtained results clearly demonstrate that a high strain gradient in a diaphragm can polarize a PZT film through a flexoelectric effect, and that the induced piezoelectric response of the diaphragm can be controlled by adjusting its curvature.

  17. Modeling and Design of Capacitive Micromachined Ultrasonic Transducers Based-on Database Optimization

    International Nuclear Information System (INIS)

    Chang, M W; Gwo, T J; Deng, T M; Chang, H C

    2006-01-01

    A Capacitive Micromachined Ultrasonic Transducers simulation database, based on electromechanical coupling theory, has been fully developed for versatile capacitive microtransducer design and analysis. Both arithmetic and graphic configurations are used to find optimal parameters based on serial coupling simulations. The key modeling parameters identified can improve microtransducer's character and reliability effectively. This method could be used to reduce design time and fabrication cost, eliminating trial-and-error procedures. Various microtransducers, with optimized characteristics, can be developed economically using the developed database. A simulation to design an ultrasonic microtransducer is completed as an executed example. The dependent relationship between membrane geometry, vibration displacement and output response is demonstrated. The electromechanical coupling effects, mechanical impedance and frequency response are also taken into consideration for optimal microstructures. The microdevice parameters with the best output signal response are predicted, and microfabrication processing constraints and realities are also taken into consideration

  18. Corporate array of micromachined dipoles on silicon wafer for 60 GHz communication systems

    KAUST Repository

    Sallam, M. O.

    2013-03-01

    In this paper, an antenna array operating at 60 GHz and realized on 0.675 mm thick silicon substrate is presented. The array is constructed using four micromachined half-wavelength dipoles fed by a corporate feeding network. Isolation between the antenna array and its feeding network is achieved via a ground plane. This arrangement leads to maximizing the broadside radiation with relatively high front-to-back ratio. Simulations have been carried out using both HFSS and CST, which showed very good agreement. Results reveal that the proposed antenna array has good radiation characteristics, where the directivity, gain, and radiation efficiency are around 10.5 dBi, 9.5 dBi, and 79%, respectively. © 2013 IEEE.

  19. Benzocyclobutene-based electric micromachines supported on microball bearings: Design, fabrication, and characterization

    Science.gov (United States)

    Modafe, Alireza

    This dissertation summarizes the research activities that led to the development of the first microball-bearing-supported linear electrostatic micromotor with benzocyclobutene (BCB) low-k polymer insulating layers. The primary application of this device is long-range, high-speed linear micropositioning. The future generations of this device include rotary electrostatic micromotors and microgenerators. The development of the first generation of microball-bearing-supported micromachines, including device theory, design, and modeling, material characterization, process development, device fabrication, and device test and characterization is presented. The first generation of these devices is based on a 6-phase, bottom-drive, linear, variable-capacitance micromotor (B-LVCM). The design of the electrical and mechanical components of the micromotor, lumped-circuit modeling of the device and electromechanical characteristics, including variable capacitance, force, power, and speed are presented. Electrical characterization of BCB polymers, characterization of BCB chemical mechanical planarization (CMP), development of embedded BCB in silicon (EBiS) process, and integration of device components using microfabrication techniques are also presented. The micromotor consists of a silicon stator, a silicon slider, and four stainless-steel microballs. The aligning force profile of the micromotor was extracted from simulated and measured capacitances of all phases. An average total aligning force of 0.27 mN with a maximum of 0.41 mN, assuming a 100 V peak-to-peak square-wave voltage, was measured. The operation of the micromotor was verified by applying square-wave voltages and characterizing the slider motion. An average slider speed of 7.32 mm/s when excited by a 40 Hz, 120 V square-wave voltage was reached without losing the synchronization. This research has a pivotal impact in the field of power microelectromechanical systems (MEMS). It establishes the foundation for the

  20. Use of Remote Technology in the Surface Water Environmental Monitoring Program at SRS Reducing Measurements in the Field - 13336

    International Nuclear Information System (INIS)

    Eddy, T.; Terry, B.; Meyer, A.; Hall, J.; Allen, P.; Hughey, D.; Hartley, T.

    2013-01-01

    There are a wide range of sensor and remote technology applications available for use in environmental monitoring programs. Each application has its own set of limitations and can be challenging when attempting to utilize it under diverse environmental field conditions. The Savannah River Site Environmental Monitoring Program has implemented several remote sensing and surface water flow technologies that have increased the quality of the data while reducing the number of field measurements. Implementation of this technology reduced the field time for personnel that commute across the Savannah River Site (SRS) over a span of 310 square miles. The wireless surface water flow technology allows for immediate notification of changing field conditions or equipment failure thus reducing data-loss or erroneous field data and improving data-quality. This wireless flow technology uses the stage-to-flow methodology coupled with implementation of a robust highly accurate Acoustic Doppler Profiler system for measuring discharge under various field conditions. Savings for implementation of the wireless flow application and Flowlink R technology equates to approximately 1175 hours annually for the radiological liquid effluent and surveillance programs. The SonTek River Suveyor and Flowtracker technologies are utilized for calibration of the wireless flow monitoring devices in the site streams and validation of effluent flows at the SRS. Implementation of similar wireless devices is also planned in the National Pollutant Discharge Elimination System (NPDES) Storm-water Monitoring Program. SRS personnel have been developing a unique flow actuator device. This device activates an ISCO TM automated sampler under flowing conditions at storm-water outfall locations across the site. This technology is unique in that it was designed to be used under field conditions with rapid changes in flow and sedimentation where traditional actuators have been unsuccessful in tripping the automated

  1. A Reuse Evaluation for Solar-Cell Silicon Wafers via Shift Revolution and Tool Rotation Using Magnetic Assistance in Ultrasonic Electrochemical Micromachining

    Directory of Open Access Journals (Sweden)

    P. S. Pa

    2013-01-01

    Full Text Available A new reuse fabrication using a tool module with rotation and revolution through a process of magnetic assistance in ultrasonic electrochemical micromachining (UEMM for removal of the surface layers from silicon wafers of solar cells is demonstrated. The target of the proposed reuse fabrication method is to replace the current approach, which uses strong acid and grinding and may damage the physical structure of silicon wafers and pollute to the environment. A precisely engineered clean production approach to removal of surface microstructure layers from silicon wafers is to develop a mass production system for recycling defective or discarded silicon wafers of solar cells that can reduce pollution and cost. The high revolution speed of the shift with the high rotation speed of the designed tool increases the discharge mobility and improves the removal effect associated with the high feed rate of the workpiece. High frequency and high power of ultrasonic with large electrolyte flow rate and high magnetic strengths with a small distance between the two magnets provide a large discharge effect and good removal; only a short period of time is required to remove the epoxy film and Si3N4 layer easily and cleanly.

  2. Influence of gas-powder laser cladding’s technological parameters on structural characteristics of corrosion-resistant steels’ restored surface layer

    Science.gov (United States)

    Krylova, S. E.; Oplesnin, S. P.; Goltyapin, M. I.

    2018-03-01

    The results of the developed industrial technology for surface restoration of corrosion-resistant steels by laser surfacing are presented in the article. A comparative analysis of the microstructure of the welded wear-resistant layer, the fusion zone with the base material and the diffusion zone for different technological surfacing regimes are given. Dyrometric studies and nondestructive testing of the deposited layer for defects were performed

  3. Development of Advanced Surface Enhancement Technology for Decreasing Wear and Corrosion of Equipment Used for Mineral Processing

    Energy Technology Data Exchange (ETDEWEB)

    Daniel Tao; Craig A. Blue

    2004-08-01

    Equipment wear is a major concern in the mineral processing industry, which dramatically increases the maintenance cost and adversely affects plant operation efficiency. In this research, wear problems of mineral processing equipment including screens, sieve bends, heavy media vessel, dewatering centrifuge, etc., were identified. A novel surface treatment technology, high density infrared (HDI) surface coating process was proposed for the surface enhancement of selected mineral processing equipment. Microstructural and mechanical properties of the coated samples were characterized. Laboratory-simulated wear tests were conducted to evaluate the tribological performance of the coated components. Test results indicate that the wear resistance of AISI 4140 and ASTM A36 steels can be increased 3 and 5 folds, respectively by the application of HDI coatings.

  4. Environmental Aspects Of The Green Surface Plastic Deformation Technology Of Car Parts

    Science.gov (United States)

    Grigoriev, S. N.; Bobrovskij, N. M.; Bobrovskij, I. N.; Melnikov, P. A.; Lukyanov, A. A.

    2017-01-01

    Foreign and domestic experience in development of dry processing technologies are considered. The results of the introduction of dry processing technologies (cutting, boring, milling, drilling) on the industrial companies in Germany are given. The negative impact on the environment and human health is shown. The possible ways of leakage of lubricoolant components in the atmosphere and soil are considered. Lubricoolants are considered as a required permanent component. Three main tasks for lubricoolant: cooling, lubricating and chip disposal are discribed.

  5. Strengthening of the nuclear valve sealing surface by laser cladding technology

    International Nuclear Information System (INIS)

    Shi Shihong; Huang Guodong

    1998-07-01

    A 5 kW laser with CO 2 flow transverse for cladding Co-base alloy or Ni-base alloy coat on the austenite matrix of the nuclear valve sealing surface is introduced. The results show that, after the sealing surface of valve is processed by the laser cladding, the coat of 3.0 mm thick can be made with smooth surface. The test and comparison analysis indicate that the structure and all performance have obvious advantages over that of the plasma spurt welding, bead welding and flame welding processing

  6. Surface processing by high power excimer laser

    Energy Technology Data Exchange (ETDEWEB)

    Stehle, M [SOPRA, 92 - Bois-Colombes (France)

    1995-03-01

    Surface processing with lasers is a promising field of research and applications because lasers bring substantial advantages : laser beams work at distance, laser treatments are clean in respect of environment consideration and they offer innovative capabilities for surface treatment which cannot be reached by other way. Excimer lasers are pulsed, gaseous lasers which emit in UV spectral range - the most common are XeCl (308 nm), KrF (248 nm), ArF (193 nm). From 1980 up to 1994, many of them have been used for research, medical and industrial applications such as spectroscopy, PRK (photo-refractive keratotomy) and micro-machining. In the last six years, from 1987 up to 1993, efforts have been done in order to jump from 100 W average power up to 1 kW for XeCl laser at {lambda} = 308 nm. It was the aim of AMMTRA project in Japan as EU205 and EU213 Eureka projects in Europe. In this framework, SOPRA developed VEL (Very large Excimer Laser). In 1992, 1 kW (10 J x 100 Hz) millstone has been reached for the first time, this technology is based on X-Ray preionization and large laser medium (5 liters). Surface treatments based on this laser source are the main purpose of VEL Lasers. Some of them are given for instance : (a) Turbine blades made with metallic substrate and ceramic coatings on the top, are glazed in order to increase corrosion resistance of ceramic and metal sandwich. (b) Selective ablation of organic coatings deposited on fragile composite material is investigated in Aerospace industry. (c) Chock hardening of bulk metallic materials or alloys are investigated for automotive industry in order to increase wear resistance. (d) Ablation of thin surface oxides of polluted steels are under investigation in nuclear industry for decontamination. (J.P.N.).

  7. Surface processing by high power excimer laser

    International Nuclear Information System (INIS)

    Stehle, M.

    1995-01-01

    Surface processing with lasers is a promising field of research and applications because lasers bring substantial advantages : laser beams work at distance, laser treatments are clean in respect of environment consideration and they offer innovative capabilities for surface treatment which cannot be reached by other way. Excimer lasers are pulsed, gaseous lasers which emit in UV spectral range - the most common are XeCl (308 nm), KrF (248 nm), ArF (193 nm). From 1980 up to 1994, many of them have been used for research, medical and industrial applications such as spectroscopy, PRK (photo-refractive keratotomy) and micro-machining. In the last six years, from 1987 up to 1993, efforts have been done in order to jump from 100 W average power up to 1 kW for XeCl laser at λ = 308 nm. It was the aim of AMMTRA project in Japan as EU205 and EU213 Eureka projects in Europe. In this framework, SOPRA developed VEL (Very large Excimer Laser). In 1992, 1 kW (10 J x 100 Hz) millstone has been reached for the first time, this technology is based on X-Ray preionization and large laser medium (5 liters). Surface treatments based on this laser source are the main purpose of VEL Lasers. Some of them are given for instance : a) Turbine blades made with metallic substrate and ceramic coatings on the top, are glazed in order to increase corrosion resistance of ceramic and metal sandwich. b) Selective ablation of organic coatings deposited on fragile composite material is investigated in Aerospace industry. c) Chock hardening of bulk metallic materials or alloys are investigated for automotive industry in order to increase wear resistance. d) Ablation of thin surface oxides of polluted steels are under investigation in nuclear industry for decontamination. (J.P.N.)

  8. Using laser technological unit ALTI "Karavella" for precision components of IEP production

    Science.gov (United States)

    Labin, N. A.; Chursin, A. D.; Paramonov, V. S.; Klimenko, V. I.; Paramonova, G. M.; Kolokolov, I. S.; Vinogradov, K. Y.; Betina, L. L.; Bulychev, N. A.; Dyakov, Yu. A.; Zakharyan, R. A.; Kazaryan, M. A.; Koshelev, K. K.; Kosheleva, O. K.; Grigoryants, A. G.; Shiganov, I. N.; Krasovskii, V. I.; Sachkov, V. I.; Plyaka, P. S.; Feofanov, I. N.; Chen, C.

    2015-12-01

    The paper revealed the using of industrial production equipment ALTI "Karavella-1", "Karavella-1M", "Karavella-2" and "Karavella-2M" precision components of IEP production [1-4]. The basis for the ALTI using in the IEP have become the positive results of research and development of technologies of foil (0.01-0.2 mm) and thin sheets (0.3-1 mm) materials micromachining by pulsed radiation CVL [5, 6]. To assess the micromachining quality and precision the measuring optical microscope (UHL VMM200), projection microscope (Mitutoyo PV5100) and Carl Zeiss microscope were used.

  9. Method of surface error visualization using laser 3D projection technology

    Science.gov (United States)

    Guo, Lili; Li, Lijuan; Lin, Xuezhu

    2017-10-01

    In the process of manufacturing large components, such as aerospace, automobile and shipping industry, some important mold or stamped metal plate requires precise forming on the surface, which usually needs to be verified, if necessary, the surface needs to be corrected and reprocessed. In order to make the correction of the machined surface more convenient, this paper proposes a method based on Laser 3D projection system, this method uses the contour form of terrain contour, directly showing the deviation between the actually measured data and the theoretical mathematical model (CAD) on the measured surface. First, measure the machined surface to get the point cloud data and the formation of triangular mesh; secondly, through coordinate transformation, unify the point cloud data to the theoretical model and calculate the three-dimensional deviation, according to the sign (positive or negative) and size of the deviation, use the color deviation band to denote the deviation of three-dimensional; then, use three-dimensional contour lines to draw and represent every coordinates deviation band, creating the projection files; finally, import the projection files into the laser projector, and make the contour line projected to the processed file with 1:1 in the form of a laser beam, compare the Full-color 3D deviation map with the projection graph, then, locate and make quantitative correction to meet the processing precision requirements. It can display the trend of the machined surface deviation clearly.

  10. Development of Additive Construction Technologies for Application to Development of Lunar/Martian Surface Structures Using In-Situ Materials

    Science.gov (United States)

    Werkheiser, Niki J.; Fiske, Michael R.; Edmunson, Jennifer E.; Khoshnevis, Berokh

    2015-01-01

    For long-duration missions on other planetary bodies, the use of in situ materials will become increasingly critical. As human presence on these bodies expands, so must the breadth of the structures required to accommodate them including habitats, laboratories, berms, radiation shielding for natural radiation and surface reactors, garages, solar storm shelters, greenhouses, etc. Planetary surface structure manufacturing and assembly technologies that incorporate in situ resources provide options for autonomous, affordable, pre-positioned environments with radiation shielding features and protection from micrometeorites, exhaust plume debris, and other hazards. The ability to use in-situ materials to construct these structures will provide a benefit in the reduction of up-mass that would otherwise make long-term Moon or Mars structures cost prohibitive. The ability to fabricate structures in situ brings with it the ability to repair these structures, which allows for the self-sufficiency and sustainability necessary for long-duration habitation. Previously, under the auspices of the MSFC In-Situ Fabrication and Repair (ISFR) project and more recently, under the jointly-managed MSFC/KSC Additive Construction with Mobile Emplacement (ACME) project, the MSFC Surface Structures Group has been developing materials and construction technologies to support future planetary habitats with in-situ resources. One such additive construction technology is known as Contour Crafting. This paper presents the results to date of these efforts, including development of novel nozzle concepts for advanced layer deposition using this process. Conceived initially for rapid development of cementitious structures on Earth, it also lends itself exceptionally well to the automated fabrication of planetary surface structures using minimally processed regolith as aggregate, and binders developed from in situ materials as well. This process has been used successfully in the fabrication of

  11. Photon technology. Laser process technology; Photon technology. Laser process gijutsu

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1997-03-01

    For developing laser process technology by interaction between substance and photon, the present state, system, R and D issues and proposal of such technology were summarized. Development of the photon technology aims at the modification of bonding conditions of substances by quantum energy of photon, and the new process technology for generating ultra- high temperature and pressure fields by concentrating photon on a minute region. Photon technology contributes to not only the conventional mechanical and thermal forming and removal machining but also function added machining (photon machining) in quantum level and new machining technology ranging from macro- to micro-machining, creating a new industrial field. This technology extends various fields from the basis of physics and chemistry to new bonding technology. Development of a compact high-quality high-power high-efficiency photon source, and advanced photon transmission technology are necessary. The basic explication of an unsolved physicochemical phenomenon related to photon and substance, and development of related application technologies are essential. 328 refs., 147 figs., 13 tabs.

  12. A comparison of surface topography characterization technologies for use in comparing spent bullet and cartridge case signatures

    Energy Technology Data Exchange (ETDEWEB)

    Batishko, C.R.; Hickman, B.J.; Cuta, F.M.

    1992-11-01

    The Pacific Northwest Laboratory was tasked by the US Department of Energy to provide technical assistance to the Federal Bureau of Investigation in evaluating and ranking technologies potentially useful in high-speed comparison of unique spent bullet and cartridge case surface signatures. Information sources included vendor input, current relevant literature, vendor phone contacts, other FBI resources, relevant PNL reports, and personal contact with numerous PNL technical staff. A comprehensive list of technologies was reduced to a list of 38 by grouping very similar methodologies, and further reduced to a short list of six by applying a set of five minimum functional requirements. A total of 14 primary criteria, many having secondary criteria, were subsequently used to evaluate each technology. The ranked short list results are reported and supported in this document, and their scores normalized to a hypothetical ideal system are as follows: (1) confocal microscopy 82.13; (2) laser dynamic focusing 72.04; (3)moire interferometry V70.94; (4)fringe field capacitance;(5)laser triangulation 66.18; (6)structured/sectioned light 65.55. Information available within the time/budget constraints which was used for the evaluation and ranking was not sufficiently detailed to evaluate specific implementations of the technologies. Each of the technologies in the short list was judged potentially capable of meeting the minimum requirements. Clever, novel engineering solutions resulting in a more cost-effective system, or a closer fit to the ``ideal system,`` could result in a reordering of the short list when actual technical proposals are evaluated. Therefore, it is recommended that a Request for Proposal not be limited to only the highest ranked technology, but include all six technologies in the short list.

  13. A comparison of surface topography characterization technologies for use in comparing spent bullet and cartridge case signatures

    Energy Technology Data Exchange (ETDEWEB)

    Batishko, C.R.; Hickman, B.J.; Cuta, F.M.

    1992-11-01

    The Pacific Northwest Laboratory was tasked by the US Department of Energy to provide technical assistance to the Federal Bureau of Investigation in evaluating and ranking technologies potentially useful in high-speed comparison of unique spent bullet and cartridge case surface signatures. Information sources included vendor input, current relevant literature, vendor phone contacts, other FBI resources, relevant PNL reports, and personal contact with numerous PNL technical staff. A comprehensive list of technologies was reduced to a list of 38 by grouping very similar methodologies, and further reduced to a short list of six by applying a set of five minimum functional requirements. A total of 14 primary criteria, many having secondary criteria, were subsequently used to evaluate each technology. The ranked short list results are reported and supported in this document, and their scores normalized to a hypothetical ideal system are as follows: (1) confocal microscopy 82.13; (2) laser dynamic focusing 72.04; (3)moire interferometry V70.94; (4)fringe field capacitance;(5)laser triangulation 66.18; (6)structured/sectioned light 65.55. Information available within the time/budget constraints which was used for the evaluation and ranking was not sufficiently detailed to evaluate specific implementations of the technologies. Each of the technologies in the short list was judged potentially capable of meeting the minimum requirements. Clever, novel engineering solutions resulting in a more cost-effective system, or a closer fit to the ideal system,'' could result in a reordering of the short list when actual technical proposals are evaluated. Therefore, it is recommended that a Request for Proposal not be limited to only the highest ranked technology, but include all six technologies in the short list.

  14. Simulation of the Mitra 15 micro-machine on IBM 360/91. Microprogramming of the fast Fourier transform

    International Nuclear Information System (INIS)

    Augustides, Jean

    1973-01-01

    As computing time did not allow working in real time, and as different methods had been proposed to reduce the computing time (the Cooley-Tuckey method, the use of specific FFT processors), this thesis proposes an intermediate solution, between the entirely programmed solution and the entirely cabled solution. After some generalities on micro-programming (definition, history, benefits and drawbacks, perspectives), the author reports the micro-programming of the Mitra 15 micro-machine: description of the machine, memory, command memory and associated circuits, interruptions and suspensions, descriptions of micro-statements, execution of a micro-statement. Programs and subroutines developed for the modelling of Mitra 15 micro-machine on IBM 360/91 are presented. Then, the author reports the micro-programming of the fast Fourier transform: theory, program description, and test

  15. Heterogeneous Wireless Mesh Network Technology Evaluation for Space Proximity and Surface Applications

    Science.gov (United States)

    DeCristofaro, Michael A.; Lansdowne, Chatwin A.; Schlesinger, Adam M.

    2014-01-01

    NASA has identified standardized wireless mesh networking as a key technology for future human and robotic space exploration. Wireless mesh networks enable rapid deployment, provide coverage in undeveloped regions. Mesh networks are also self-healing, resilient, and extensible, qualities not found in traditional infrastructure-based networks. Mesh networks can offer lower size, weight, and power (SWaP) than overlapped infrastructure-perapplication. To better understand the maturity, characteristics and capability of the technology, we developed an 802.11 mesh network consisting of a combination of heterogeneous commercial off-the-shelf devices and opensource firmware and software packages. Various streaming applications were operated over the mesh network, including voice and video, and performance measurements were made under different operating scenarios. During the testing several issues with the currently implemented mesh network technology were identified and outlined for future work.

  16. Study on dynamic deformation synchronized measurement technology of double-layer liquid surfaces

    Science.gov (United States)

    Tang, Huiying; Dong, Huimin; Liu, Zhanwei

    2017-11-01

    Accurate measurement of the dynamic deformation of double-layer liquid surfaces plays an important role in many fields, such as fluid mechanics, biomechanics, petrochemical industry and aerospace engineering. It is difficult to measure dynamic deformation of double-layer liquid surfaces synchronously for traditional methods. In this paper, a novel and effective method for full-field static and dynamic deformation measurement of double-layer liquid surfaces has been developed, that is wavefront distortion of double-wavelength transmission light with geometric phase analysis (GPA) method. Double wavelength lattice patterns used here are produced by two techniques, one is by double wavelength laser, and the other is by liquid crystal display (LCD). The techniques combine the characteristics such as high transparency, low reflectivity and fluidity of liquid. Two color lattice patterns produced by laser and LCD were adjusted at a certain angle through the tested double-layer liquid surfaces simultaneously. On the basis of the refractive indexes difference of two transmitted lights, the double-layer liquid surfaces were decoupled with GPA method. Combined with the derived relationship between phase variation of transmission-lattice patterns and out-of plane heights of two surfaces, as well as considering the height curves of the liquid level, the double-layer liquid surfaces can be reconstructed successfully. Compared with the traditional measurement method, the developed method not only has the common advantages of the optical measurement methods, such as high-precision, full-field and non-contact, but also simple, low cost and easy to set up.

  17. Feasibility of Cathode Surface Coating Technology for High-Energy Lithium-ion and Beyond-Lithium-ion Batteries.

    Science.gov (United States)

    Kalluri, Sujith; Yoon, Moonsu; Jo, Minki; Liu, Hua Kun; Dou, Shi Xue; Cho, Jaephil; Guo, Zaiping

    2017-12-01

    Cathode material degradation during cycling is one of the key obstacles to upgrading lithium-ion and beyond-lithium-ion batteries for high-energy and varied-temperature applications. Herein, we highlight recent progress in material surface-coating as the foremost solution to resist the surface phase-transitions and cracking in cathode particles in mono-valent (Li, Na, K) and multi-valent (Mg, Ca, Al) ion batteries under high-voltage and varied-temperature conditions. Importantly, we shed light on the future of materials surface-coating technology with possible research directions. In this regard, we provide our viewpoint on a novel hybrid surface-coating strategy, which has been successfully evaluated in LiCoO 2 -based-Li-ion cells under adverse conditions with industrial specifications for customer-demanding applications. The proposed coating strategy includes a first surface-coating of the as-prepared cathode powders (by sol-gel) and then an ultra-thin ceramic-oxide coating on their electrodes (by atomic-layer deposition). What makes it appealing for industry applications is that such a coating strategy can effectively maintain the integrity of materials under electro-mechanical stress, at the cathode particle and electrode- levels. Furthermore, it leads to improved energy-density and voltage retention at 4.55 V and 45 °C with highly loaded electrodes (≈24 mg.cm -2 ). Finally, the development of this coating technology for beyond-lithium-ion batteries could be a major research challenge, but one that is viable. © 2017 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

  18. Micromachining of Al2O3-TiC ceramics by excimer laser

    Directory of Open Access Journals (Sweden)

    Oliveira, V.

    1998-04-01

    Full Text Available Micromachining of Al2O3-TiC ceramic using a KrF excimer laser was studied in the fluence range 2 to 8 J/cm2 . The ablation rate decreases and the roughness increases with the first pulses but after about 200 pulses the process reaches a stationary stage where both roughness and ablation rate become constant. Observation of the processed areas by scanning electron microscopy showed that a globular topography is formed during the first stage and that the surface topography remains unchanged with further pulses. This globular topography is responsible for the variation of roughness and ablation rate observed during the first stage. EDS analysis showed that the globular features present an external region with higher titanium content and a core formed of unaffected material.

    Se estudia el micromecanizado de cerámicas Al2O3-TiC mediante un láser de excímero de KrF con un rango de fluencia de 2 a 8 J/cm2 . La velocidad de ablación disminuye y la rugosidad aumenta con los primeros pulsos. Sin embargo, después de 200 pulsos, el proceso alcanza el régimen estacionario, donde tanto la rugosidad como la velocidad de ablación permanecen constantes. La observación mediante SEM de determinadas áreas mostraban una topografía globular formada durante la primera etapa, mientras que con los siguientes pulsos permanece in cambios. Esta topografía globular es responsable de la variación de rugosidad y de la velocidad de ablación observada durante las primeras etapas del proceso. Los análisis de EDS sobre las zonas globulares mostraron la existencia de una región externa rica en titanio y un núcleo formado por el material sin afectar.

  19. Exercise in Experimental Plastics Technology: Hot Embossing of Polymers with surface microstructure

    DEFF Research Database (Denmark)

    Eriksson, Torbjörn Gerhard; Rasmussen, Henrik Koblitz

    2004-01-01

    Hot Embossing of polymers with surface microstructure Polymer materials have proven to be good materials for manufacturing nano/ and microstructure. There are three major processing techniques: hot embossing, injection moulding and casting. Hot embossing provides several advantages such as relati......Hot Embossing of polymers with surface microstructure Polymer materials have proven to be good materials for manufacturing nano/ and microstructure. There are three major processing techniques: hot embossing, injection moulding and casting. Hot embossing provides several advantages...... such as relatively low cost for embossing tools, simple operation and high replication accuracy for small features. Two different plastic materials will be used to replicate surface microstructures by hot embossing. The hot embossing will be done in a hydraulic press where it is easy to control temperature...

  20. Experimental Comparison of the Tribological Properties of Selected Surfaces Created by Thermal Spraying Technology

    Directory of Open Access Journals (Sweden)

    František Tóth

    2016-01-01

    Full Text Available The scientific article titled “Experimental comparison of the tribological properties of selected surfaces created by thermal spraying technology” deals with the surface condition of selected pairs working within the mixed friction before and after experimental tests. Based on the chosen methodology, the experimental tests were performed on the Tribotestor M’06 testing machine. The ecological oil MOGUL HEES 46 (manufactured by Paramo was used as a lubricant. The tests were performed on selected material pairs. The first friction element was a shaft of steel 14 220. The second friction element was a steel plate of steel 11 373 with a friction surface created by two materials, i.e. CuSn10 and NP 40. The results are statistically elaborated and illustrated in figures and tables.

  1. Derivation of Ground Surface and Vegetation in a Coastal Florida Wetland with Airborne Laser Technology

    Science.gov (United States)

    Raabe, Ellen A.; Harris, Melanie S.; Shrestha, Ramesh L.; Carter, William E.

    2008-01-01

    The geomorphology and vegetation of marsh-dominated coastal lowlands were mapped from airborne laser data points collected on the Gulf Coast of Florida near Cedar Key. Surface models were developed using low- and high-point filters to separate ground-surface and vegetation-canopy intercepts. In a non-automated process, the landscape was partitioned into functional landscape units to manage the modeling of key landscape features in discrete processing steps. The final digital ground surface-elevation model offers a faithful representation of topographic relief beneath canopies of tidal marsh and coastal forest. Bare-earth models approximate field-surveyed heights by + 0.17 m in the open marsh and + 0.22 m under thick marsh or forest canopy. The laser-derived digital surface models effectively delineate surface features of relatively inaccessible coastal habitats with a geographic coverage and vertical detail previously unavailable. Coastal topographic details include tidal-creek tributaries, levees, modest topographic undulations in the intertidal zone, karst features, silviculture, and relict sand dunes under coastal-forest canopy. A combination of laser-derived ground-surface and canopy-height models and intensity values provided additional mapping capabilities to differentiate between tidal-marsh zones and forest types such as mesic flatwood, hydric hammock, and oak scrub. Additional derived products include fine-scale shoreline and topographic profiles. The derived products demonstrate the capability to identify areas of concern to resource managers and unique components of the coastal system from laser altimetry. Because the very nature of a wetland system presents difficulties for access and data collection, airborne coverage from remote sensors has become an accepted alternative for monitoring wetland regions. Data acquisition with airborne laser represents a viable option for mapping coastal topography and for evaluating habitats and coastal change on marsh

  2. TECHNOLOGICAL ISSUES IN MECHANISED FEED WIG/TIG WELDING SURFACING OF WELDING

    Directory of Open Access Journals (Sweden)

    BURCA Mircea

    2016-09-01

    manual welding tests in the light of using the process for welding surfacing being known that in such applications mechanised operations are recommended whenever possible given the latter strengths i.e. increased productivity and quality deposits. The research also aims at achieving a comparative a study between wire mechanised feed based WIG manual welding and the manual rod entry based manual welding in terms of geometry deposits, deposits aesthetics, operating technique, productivity, etc . In this regard deposits were made by means of two welding procedures, and subsequently welding surfacing was made with the optimum values of the welding parameters in this case.

  3. Lunar and planetary surface conditions advances in space science and technology

    CERN Document Server

    Weil, Nicholas A

    1965-01-01

    Lunar and Planetary Surface Conditions considers the inferential knowledge concerning the surfaces of the Moon and the planetary companions in the Solar System. The information presented in this four-chapter book is based on remote observations and measurements from the vantage point of Earth and on the results obtained from accelerated space program of the United States and U.S.S.R. Chapter 1 presents the prevalent hypotheses on the origin and age of the Solar System, followed by a brief description of the methods and feasibility of information acquisition concerning lunar and planetary data,

  4. Development of optical interference-type micro accelerometer for subsurface microseismic measurement; Micromachining ni yoru chika danseiha keisoku no tame no hikari kanshogata kasokudo sensor no kaihatsu

    Energy Technology Data Exchange (ETDEWEB)

    Hirata, K; Niitsuma, H; Esashi, M [Tohoku University, Sendai (Japan). Faculty of Engineering

    1997-10-22

    Manufacture is under way of an optical interference-type micro accelerometer making use of the micromachining technology and an optical fiber measuring system for detecting microseismic waves in the ground. The sensor is required to be capable of detecting acceleration 0.1-1gal in amplitude, to be flat in amplitude characteristic in a frequency range of 10Hz-several kHz, to be ensured of straight phase characteristics to enable the measurement of transient phenomena, to be low in cross sensitivity, and to be high in resistance to water, pressure, and heat. The sensor is constructed in the following way. In the process for treating silicon, anisotropic etching is performed for the formation of a gap between the fiber end face and oscillator, boron is diffused, a stopper is formed, and then the silicon is subjected to penetrating etching. In the process for the optical fiber section, an optical fiber is inserted into a glass tube and fixed by an adhesive agent, and then the glass tube end face is polished, this together with the fiber end. Indium-tin oxide is sputtered onto the glass tube end. Finally, the sensor is assembled. 5 refs., 4 figs., 1 tab.

  5. Cloud tolerance of remote sensing technologies to measure land surface temperature

    Science.gov (United States)

    Conventional means to estimate land surface temperature (LST) from space relies on the thermal infrared (TIR) spectral window and is limited to cloud-free scenes. To also provide LST estimates during periods with clouds, a new method was developed to estimate LST based on passive microwave (MW) obse...

  6. Proceedings of workshop on surface finishing by radiation curing technology: radiation curing for better finishing

    International Nuclear Information System (INIS)

    1993-01-01

    This book compiled the paper presented at this workshop. The papers discussed are 1. Introduction to radiation curing, 2. Radiation sources -ultraviolet and electron beams, 3. UV/EB curing of surface coating - wood and nonwood substrates, 4. Development of EPOLA (epoxidised palm oil products acrylate) and its application, 5. Development of radiation-curable resin based natural rubber

  7. Proceedings of workshop on surface finishing by radiation curing technology: radiation curing for better finishing

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1994-12-31

    This book compiled the paper presented at this workshop. The papers discussed are 1. Introduction to radiation curing, 2. Radiation sources -ultraviolet and electron beams, 3. UV/EB curing of surface coating - wood and nonwood substrates, 4. Development of EPOLA (epoxidised palm oil products acrylate) and its application, 5. Development of radiation-curable resin based natural rubber.

  8. Surface photo reaction processes using synchrotron radiation; Hoshako reiki ni yoru hyomenko hanno process

    Energy Technology Data Exchange (ETDEWEB)

    Imaizumi, Y. [Tohoku University, Sendai (Japan). Institute for Materials Research; Yoshigoe, A. [Toyohashi University of Technology, Aichi (Japan); Urisu, T. [Toyohashi University of Technology, Aichi (Japan). Institute for Molecular Science

    1997-08-20

    This paper introduces the surface photo reaction processes using synchrotron radiation, and its application. A synchrotron radiation process using soft X-rays contained in electron synchrotron radiated light as an excited light source has a possibility of high-resolution processing because of its short wave length. The radiated light can excite efficiently the electronic state of a substance, and can induce a variety of photochemical reactions. In addition, it can excite inner shell electrons efficiently. In the aspect of its application, it has been found that, if radiated light is irradiated on surfaces of solids under fluorine-based reaction gas or Cl2, the surfaces can be etched. This technology is utilized practically. With regard to radiated light excited CVD process, it may be said that anything that can be deposited by the ordinary plasma CVD process can be deposited. Its application to epitaxial crystal growth may be said a nano processing application in thickness direction, such as forming an ultra-lattice structure, the application being subjected to expectation. In micromachine fabricating technologies, a possibility is searched on application of a photo reaction process of the radiated light. 5 refs., 6 figs.

  9. [Optimization of dissolution process for superfine grinding technology on total saponins of Panax ginseng fibrous root by response surface methodology].

    Science.gov (United States)

    Zhao, Ya; Lai, Xiao-Pin; Yao, Hai-Yan; Zhao, Ran; Wu, Yi-Na; Li, Geng

    2014-03-01

    To investigate the effects of superfine comminution extraction technology of ginseng total saponins from Panax ginseng fibrous root, and to make sure the optimal extraction condition. Optimal condition of ginseng total saponins from Panax ginseng fibrous root was based on single factor experiment to study the effects of crushing degree, extraction time, alcohol concentration and extraction temperature on extraction rate. Response surface method was used to investigate three main factors such as superfine comminution time, extraction time and alcohol concentration. The relationship between content of ginseng total saponins in Panax ginseng fibrous root and three factors fitted second degree polynomial models. The optimal extraction condition was 9 min of superfine comminution time, 70% of alcohol, 50 degrees C of extraction temperature and 70 min of extraction time. Under the optimal condition, ginseng total saponins from Panax ginseng fibrous root was average 94. 81%, which was consistent with the predicted value. The optimization of technology is rapid, efficient, simple and stable.

  10. Development of the removal technology for toxic heavy metal ions by surface-modified activated carbon

    International Nuclear Information System (INIS)

    Park, Geun Il; Song, Kee Chan; Kim, Kwang Wook; Kim, In Tae; Cho, Il Hoon; Kim, Joon Hyung

    2001-01-01

    Adsorption capacities of both radionuclides(uranium, cobalt) and toxic heavy metals (lead, cadmium and chromium) using double surface-modified activated carbon in wide pH ranges are extensively evaluated. Surface-modified activated carbons are classified as AC(as-received carbon), OAC(single surface-modified carbon with nitric acid solution) and OAC-Na(double surface-modified carbon with various alkali solutions). It is established that optimal condition for the second surface modification of OAC is to use the mixed solution of both NaOH and NaCl with total concentration of 0.1 N based on adsorption efficiencies of uranium and cobalt. Variations of adsorption efficiencies in pH ranges of 2∼10 and the adsorption capacities in batch adsorber and fixed bed for removal of both radionuclides and toxic heavy metals using OAC-Na were shown to be superior to that of the AC and OAC even in a low pH range. Capacity factors of OAC-Na for the removal of various metal ions are also excellent to that of AC or OAC. Quantitative analysis of capacity factors for each ions showed that adsorption capacity of OAC-Na increased by 30 times for uranium, 60 times for cobalt, 9 times for lead, 30 times for cadmium, 3 times for chromium compared to that of AC at pH 5, respectively. Adsorption capacity of OAC-Na is comparable to that of XAD-16-TAR used as commercial ion exchange resin

  11. Analysis of the current density characteristics in through-mask electrochemical micromachining (TMEMM for fabrication of micro-hole arrays on invar alloy film

    Directory of Open Access Journals (Sweden)

    Da-som JIN

    2017-06-01

    Full Text Available Invar alloy consisting of 64% iron and 36% nickel has been widely used for the production of shadow masks for organic light emitting diodes (OLEDs because of its low thermal expansion coefficient (1.86 × 10−6 cm/°C. To fabricate micro-hole arrays on 30 μm invar alloy film, through-mask electrochemical micromachining (TMEMM was developed and combined with a portion of the photolithography etching process. For precise hole shapes, patterned photoresist (PR film was applied as an insulating mask. To investigate the relationship between the current density and the material removal rate, the principle of the electrochemical machining was studied with a focus on the equation. The finite element method (FEM was used to verify the influence of each parameter on the current density on the invar alloy film surface. The parameters considered were the thickness of the PR mask, inter-electrode gap (IEG, and electrolyte concentration. Design of experiments (DOE was used to figure out the contribution of each parameter. A simulation was conducted with varying parameters to figure out their relationships with the current density. Optimization was conducted to select the suitable conditions. An experiment was carried out to verify the simulation results. It was possible to fabricate micro-hole arrays on invar alloy film using TMEMM, which is a promising method that can be applied to fabrications of OLEDs shadow masks.

  12. A small-displacement sensor using total internal reflection theory and surface plasmon resonance technology for heterodyne interferometry.

    Science.gov (United States)

    Wang, Shinn-Fwu

    2009-01-01

    A small-displacement sensor based on total-internal reflection theory and surface plasmon resonance technology is proposed for use in heterodyne interferometry. A small displacement can be obtained simply by measuring the variation in phase difference between s- and p-polarization states with the small-displacement sensor. The theoretical displacement resolution of the small-displacement sensor can reach 0.45 nm. The sensor has some additional advantages, e.g., a simple optical setup, high resolution, high sensitivity and rapid measurement. Its feasibility is also demonstrated.

  13. Method of Maintaining the Required Values of Surface Roughness and Prediction of Technological Conditions for Cold Sheet Rolling

    Directory of Open Access Journals (Sweden)

    Valíček J.

    2014-06-01

    Full Text Available The paper is based on results obtained from topography of surfaces of sheets rolled from deep-drawing steel of the type KOHAL grade 697, non-alloy low-carbon structural steel EN 10263-2:2004 and aluminium. The presented results document correctness of the assumption that the rolling force Froll increases with the increasing reduction Δh and the quality of the rolled surface is improved at the simultaneous increasing of strength of rolled sheets and the decreasing of size of structural grains. The experiment was performed on the two-high rolling stand DUO 210 SVa, which enables only non-continuous technology in contrast to the rolling mill with continuous reduction on one sheet in several degrees on rolling trains, in consequence of which the obtained height parameters of the section are in close correlation with the predicted dependence. Contribution of the work consists in the creation of a mathematical model (algorithm for predicting technological parameters of the two-high rolling stand DUO 210 SVa at change of the absolute reduction Δh, for example for a deep-drawing steel of the type KOHAL grade 697 and non-alloy lowcarbon structural steel PN EN 10263-2:2004 and aluminium, and also in the development of a method of calculation applicable to any material being rolled in general, because the authors have found that various materials can be differentiated by a derived analytical criterion IKP. This criterion is a function of ratio between the modulus of elasticity of reference material and that of actually rolled material. The reference material is here deep-drawing steel of the type KOHAL grade 697. Verification was carried out by measuring changes of final surface roughness profile and final strength of rolled sheets of the stated materials in relation to reductions and those were compared with theoretically predicted values. It is possible to identify and predict on the basis of this algorithm an instant state of surface topography in

  14. On the Application of Replica Molding Technology for the Indirect Measurement of Surface and Geometry of Micromilled Components

    DEFF Research Database (Denmark)

    Baruffi, Federico; Parenti, Paolo; Cacciatore, Francesco

    2017-01-01

    the replica molding technology. The method consists of obtaining a replica of the feature that is inaccessible for standard measurement devices and performing its indirect measurement. This paper examines the performance of a commercial replication media applied to the indirect measurement of micromilled...... components. Two specifically designed micromilled benchmark samples were used to assess the accuracy in replicating both surface texture and geometry. A 3D confocal microscope and a focus variation instrument were employed and the associated uncertainties were evaluated. The replication method proved...... to be suitable for characterizing micromilled surface texture even though an average overestimation in the nano-metric level of the Sa parameter was observed. On the other hand, the replicated geometry generally underestimated that of the master, often leading to a different measurement output considering...

  15. Thin polycrystalline diamond films protecting zirconium alloys surfaces: From technology to layer analysis and application in nuclear facilities

    Energy Technology Data Exchange (ETDEWEB)

    Ashcheulov, P. [Institute of Physics, Academy of Sciences Czech Republic v.v.i, Na Slovance 2, CZ-182 21, Prague 8 (Czech Republic); Škoda, R.; Škarohlíd, J. [Czech Technical University in Prague, Faculty of Mechanical Engineering, Technická 4, Prague 6, CZ-160 07 (Czech Republic); Taylor, A.; Fekete, L.; Fendrych, F. [Institute of Physics, Academy of Sciences Czech Republic v.v.i, Na Slovance 2, CZ-182 21, Prague 8 (Czech Republic); Vega, R.; Shao, L. [Texas A& M University, Department of Nuclear Engineering TAMU-3133, College Station, TX TX 77843 (United States); Kalvoda, L.; Vratislav, S. [Faculty of Nuclear Science and Physical Engineering, Czech Technical University in Prague, Brehova 7, CZ-115 19, Prague 1 (Czech Republic); Cháb, V.; Horáková, K.; Kůsová, K.; Klimša, L.; Kopeček, J. [Institute of Physics, Academy of Sciences Czech Republic v.v.i, Na Slovance 2, CZ-182 21, Prague 8 (Czech Republic); Sajdl, P.; Macák, J. [University of Chemistry and Technology, Power Engineering Department, Technická 3, Prague 6, CZ-166 28 (Czech Republic); Johnson, S. [Nuclear Fuel Division, Westinghouse Electric Company, 5801 Bluff Road, Hopkins, SC 29209 (United States); Kratochvílová, I., E-mail: krat@fzu.cz [Institute of Physics, Academy of Sciences Czech Republic v.v.i, Na Slovance 2, CZ-182 21, Prague 8 (Czech Republic); Faculty of Nuclear Science and Physical Engineering, Czech Technical University in Prague, Brehova 7, CZ-115 19, Prague 1 (Czech Republic)

    2015-12-30

    Graphical abstract: - Highlights: • In this work we showed that films prepared by MW-LA-PECVD technology can be used as anticorrosion protective layer for Zircaloy2 nuclear fuel claddings at elevated temperatures (950 °C) when α phase of zirconium changes to β phase (more opened for oxygen/hydrogen diffusion). Quality of PCD films was examined by Raman spectroscopy, XPS, SEM, AFM and SIMS analysis. • The polycrystalline diamond films were of high quality - without defects and contaminations. After hot steam oxidation (950 °C) a high level of structural integrity of PCD layer was observed. Both sp{sup 2} and sp{sup 3} C phases were present in the protective PCD layer. Higher resistance and a lower degree of impedance dispersion was found in the hot steam oxidized PCD coated Zircaloy2 samples, which may suggest better protection of the Zircaloy2 surface. The PCD layer blocks the hydrogen diffusion into the Zircaloy2 surface thus protecting the material from degradation. • Hot steam oxidation tests confirmed that PCD coated Zircaloy2 surfaces were effectively protected against corrosion. Presented results demonstrate that the PCD anticorrosion protection can significantly prolong service life of Zircaloy2 nuclear fuel claddings in nuclear reactors even at elevated temperatures. - Abstract: Zirconium alloys can be effectively protected against corrosion by polycrystalline diamond (PCD) layers grown in microwave plasma enhanced linear antenna chemical vapor deposition apparatus. Standard and hot steam oxidized PCD layers grown on Zircaloy2 surfaces were examined and the specific impact of polycrystalline Zr substrate surface on PCD layer properties was investigated. It was found that the presence of the PCD coating blocks hydrogen diffusion into the Zircaloy2 surface and protects Zircaloy2 material from degradation. PCD anticorrosion protection of Zircaloy2 can significantly prolong life of Zircaloy2 material in nuclear reactors even at temperatures above Zr

  16. Novel anti-reflection technology for GaAs single-junction solar cells using surface patterning and Au nanoparticles.

    Science.gov (United States)

    Kim, Youngjo; Lam, Nguyen Dinh; Kim, Kangho; Kim, Sangin; Rotermund, Fabian; Lim, Hanjo; Lee, Jaejin

    2012-07-01

    Single-junction GaAs solar cell structures were grown by low-pressure MOCVD on GaAs (100) substrates. Micro-rod arrays with diameters of 2 microm, 5 microm, and 10 microm were fabricated on the surfaces of the GaAs solar cells via photolithography and wet chemical etching. The patterned surfaces were coated with Au nanoparticles using an Au colloidal solution. Characteristics of the GaAs solar cells with and without the micro-rod arrays and Au nanoparticles were investigated. The short-circuit current density of the GaAs solar cell with 2 microm rod arrays and Au nanoparticles increased up to 34.9% compared to that of the reference cell without micro-rod arrays and Au nanoparticles. The conversion efficiency of the GaAs solar cell that was coated with Au nanoparticles on the patterned surface with micro-rod arrays can be improved from 14.1% to 19.9% under 1 sun AM 1.5G illumination. These results show that micro-rod arrays and Au nanoparticle coating can be applied together in surface patterning to achieve a novel cost-effective anti-reflection technology.

  17. Ultrasonic detection technology based on joint robot on composite component with complex surface

    Energy Technology Data Exchange (ETDEWEB)

    Hao, Juan; Xu, Chunguang; Zhang, Lan [School of Mechanical Engineering, Beijing Institute of Technology, Beijing (China)

    2014-02-18

    Some components have complex surface, such as the airplane wing and the shell of a pressure vessel etc. The quality of these components determines the reliability and safety of related equipment. Ultrasonic nondestructive detection is one of the main methods used for testing material defects at present. In order to improve the testing precision, the acoustic axis of the ultrasonic transducer should be consistent with the normal direction of the measured points. When we use joint robots, automatic ultrasonic scan along the component surface normal direction can be realized by motion trajectory planning and coordinate transformation etc. In order to express the defects accurately and truly, the robot position and the signal of the ultrasonic transducer should be synchronized.

  18. Sustainable Development and Airport Surface Access: The Role of Technological Innovation and Behavioral Change

    OpenAIRE

    Ryley, Tim; Elmirghani, Jaafar; Budd, Tom; Miyoshi, Chikage; Mason, Keith; Moxon, Richard; Ahmed, Imad; Qazi, Bilal; Zanni, Alberto

    2013-01-01

    Sustainable development reflects an underlying tension to achieve economic growth whilst addressing environmental challenges, and this is particularly the case for the aviation sector. Although much of the aviation-related focus has fallen on reducing aircraft emissions, airports have also been under increasing pressure to support the vision of a low carbon energy future. One of the main sources of airport-related emissions is passenger journeys to and from airports (the surface access compon...

  19. Research on Laser Micro Polishing of SLS Technology Sintered Iron-Based Powder Surface

    OpenAIRE

    Gerda Vaitkūnaitė; Vladislav Markovič; Olegas Černašėjus

    2015-01-01

    The article analyzes laser micro polishing of 1.2083 steel samples produced applying selective laser sintering (SLS) method. The study has evaluated the distribution of the shape, size and temperature of the laser beam treated area in the surface layer of sintered and laser polished samples. Experimental tests have shown the impact of the technical parameters of laser micro polishing on the width and hardness of the impact zone of the treated sample. The microstructure analysis of laser treat...

  20. Biomimicry using Nano-Engineered Enhanced Condensing Surfaces for Sustainable Fresh Water Technology

    OpenAIRE

    Al-Beaini, Sara

    2012-01-01

    Biomimicry offers innovative sustainable solutions for many dire resource-based challenges. The Namib Desert beetle (sp. Stenocara) invites us to explore how we can collect fresh water more energy-efficiently. The beetle's unique back features with alternating hydrophobic-hydrophilic regions, aid its survival in a water scarce desert environment. We investigated the feasibility for enhanced condensation by patterning a zinc oxide (ZnO) surface to mimic the beetle's back. ZnO was selected as t...

  1. Seismic Technology Adapted to Analyzing and Developing Geothermal Systems Below Surface-Exposed High-Velocity Rocks Final Report

    Energy Technology Data Exchange (ETDEWEB)

    Hardage, Bob A. [Univ. of Texas, Austin, TX (United States). Bureau of Economic Geology; DeAngelo, Michael V. [Univ. of Texas, Austin, TX (United States). Bureau of Economic Geology; Ermolaeva, Elena [Univ. of Texas, Austin, TX (United States). Bureau of Economic Geology; Hardage, Bob A. [Univ. of Texas, Austin, TX (United States). Bureau of Economic Geology; Remington, Randy [Univ. of Texas, Austin, TX (United States). Bureau of Economic Geology; Sava, Diana [Univ. of Texas, Austin, TX (United States). Bureau of Economic Geology; Wagner, Donald [Univ. of Texas, Austin, TX (United States). Bureau of Economic Geology; Wei, Shuijion [Univ. of Texas, Austin, TX (United States). Bureau of Economic Geology

    2013-02-01

    The objective of our research was to develop and demonstrate seismic data-acquisition and data-processing technologies that allow geothermal prospects below high-velocity rock outcrops to be evaluated. To do this, we acquired a 3-component seismic test line across an area of exposed high-velocity rocks in Brewster County, Texas, where there is high heat flow and surface conditions mimic those found at numerous geothermal prospects. Seismic contractors have not succeeded in creating good-quality seismic data in this area for companies who have acquired data for oil and gas exploitation purposes. Our test profile traversed an area where high-velocity rocks and low-velocity sediment were exposed on the surface in alternating patterns that repeated along the test line. We verified that these surface conditions cause non-ending reverberations of Love waves, Rayleigh waves, and shallow critical refractions to travel across the earth surface between the boundaries of the fast-velocity and slow-velocity material exposed on the surface. These reverberating surface waves form the high level of noise in this area that does not allow reflections from deep interfaces to be seen and utilized. Our data-acquisition method of deploying a box array of closely spaced geophones allowed us to recognize and evaluate these surface-wave noise modes regardless of the azimuth direction to the surface anomaly that backscattered the waves and caused them to return to the test-line profile. With this knowledge of the surface-wave noise, we were able to process these test-line data to create P-P and SH-SH images that were superior to those produced by a skilled seismic data-processing contractor. Compared to the P-P data acquired along the test line, the SH-SH data provided a better detection of faults and could be used to trace these faults upward to the boundaries of exposed surface rocks. We expanded our comparison of the relative value of S-wave and P-wave seismic data for geothermal

  2. Research on Laser Micro Polishing of SLS Technology Sintered Iron-Based Powder Surface

    Directory of Open Access Journals (Sweden)

    Gerda Vaitkūnaitė

    2015-03-01

    Full Text Available The article analyzes laser micro polishing of 1.2083 steel samples produced applying selective laser sintering (SLS method. The study has evaluated the distribution of the shape, size and temperature of the laser beam treated area in the surface layer of sintered and laser polished samples. Experimental tests have shown the impact of the technical parameters of laser micro polishing on the width and hardness of the impact zone of the treated sample. The microstructure analysis of laser treated and untreated areas of the material has been made.

  3. Micromachining and dicing of sapphire, gallium nitride and micro LED devices with UV copper vapour laser

    International Nuclear Information System (INIS)

    Gu, E.; Jeon, C.W.; Choi, H.W.; Rice, G.; Dawson, M.D.; Illy, E.K.; Knowles, M.R.H.

    2004-01-01

    Gallium nitride (GaN) and sapphire are important materials for fabricating photonic devices such as high brightness light emitting diodes (LEDs). These materials are strongly resistant to wet chemical etching and also, low etch rates restrict the use of dry etching. Thus, to develop alternative high resolution processing and machining techniques for these materials is important in fabricating novel photonic devices. In this work, a repetitively pulsed UV copper vapour laser (255 nm) has been used to machine and dice sapphire, GaN and micro LED devices. Machining parameters were optimised so as to achieve controllable machining and high resolution. For sapphire, well-defined grooves 30 μm wide and 430 μm deep were machined. For GaN, precision features such as holes on a tens of micron length scale have been fabricated. By using this technique, compact micro LED chips with a die spacing 100 and a 430 μm thick sapphire substrate have been successfully diced. Measurements show that the performances of LED devices are not influenced by the UV laser machining. Our results demonstrate that the pulsed UV copper vapour laser is a powerful tool for micromachining and dicing of photonic materials and devices

  4. The Fantastic Voyage of the Trypanosome: A Protean Micromachine Perfected during 500 Million Years of Engineering

    Directory of Open Access Journals (Sweden)

    Timothy Krüger

    2018-02-01

    Full Text Available The human body is constantly attacked by pathogens. Various lines of defence have evolved, among which the immune system is principal. In contrast to most pathogens, the African trypanosomes thrive freely in the blood circulation, where they escape immune destruction by antigenic variation and incessant motility. These unicellular parasites are flagellate microswimmers that also withstand the harsh mechanical forces prevailing in the bloodstream. They undergo complex developmental cycles in the bloodstream and organs of the mammalian host, as well as the disease-transmitting tsetse fly. Each life cycle stage has been shaped by evolution for manoeuvring in distinct microenvironments. Here, we introduce trypanosomes as blueprints for nature-inspired design of trypanobots, micromachines that, in the future, could explore the human body without affecting its physiology. We review cell biological and biophysical aspects of trypanosome motion. While this could provide a basis for the engineering of microbots, their actuation and control still appear more like fiction than science. Here, we discuss potentials and challenges of trypanosome-inspired microswimmer robots.

  5. Experimental Study of the Ultrasonic Vibration-Assisted Abrasive Waterjet Micromachining the Quartz Glass

    Directory of Open Access Journals (Sweden)

    Rongguo Hou

    2018-01-01

    Full Text Available The ultrasonic vibration is used to enhance the capability of the abrasive water micromachining glass. And, the ultrasonic vibration is activated on the abrasive waterjet nozzle. The quality of the flow is improved, and the velocity of the abrasive is increased because of the addition of the ultrasonic energy. The relevant experimental results indicate that the erosion depth and the material volume removal of the glass are obviously increased when ultrasonic vibration is working. As for the influence of process parameters on the material removal of the glass such as vibration amplitude, system pressure, distance of the standoff, and abrasive size, the experimental results indicate that the system pressure and vibration contribute greatly to the glass material removal. Also, the erosion depth and the volume of material removal are increased with the increase in the vibration amplitude and system pressure. There are some uplifts found at the edge of erosion pit. Then, it can be inferred that the plastic method is an important material removal method during the machining process of ultrasonic vibration-assisted abrasive waterjet.

  6. Two Capacitive Micro-Machined Ultrasonic Transducers for Wind Speed Measurement.

    Science.gov (United States)

    Bui, Gia Thinh; Jiang, Yu-Tsung; Pang, Da-Chen

    2016-06-02

    This paper presents a new wind speed measurement method using a single capacitive micro-machined ultrasonic transducer (CMUT). The CMUT was arranged perpendicular to the direction of the wind flow, and a reflector was set up a short distance away, facing the CMUT. To reduce the size, weight, cost, and power consumption of conventional ultrasonic anemometers this study proposes two CMUT designs for the measurement of wind speed using either the amplitude of the signal or the time of flight (TOF). Each CMUT with a double array element design can transmit and receive signals in five different operation modes. Experiments showed that the two CMUT designs utilizing the TOF were better than those utilizing the amplitude of the signal for wind speed measurements ranging from 1 m/s to 10 m/s, providing a measurement error of less than 0.2 m/s. These results indicate that the sensitivity of the TOF is independent of the five operation modes.

  7. A micromachined membrane-based active probe for biomolecular mechanics measurement

    Science.gov (United States)

    Torun, H.; Sutanto, J.; Sarangapani, K. K.; Joseph, P.; Degertekin, F. L.; Zhu, C.

    2007-04-01

    A novel micromachined, membrane-based probe has been developed and fabricated as assays to enable parallel measurements. Each probe in the array can be individually actuated, and the membrane displacement can be measured with high resolution using an integrated diffraction-based optical interferometer. To illustrate its application in single-molecule mechanics experiments, this membrane probe was used to measure unbinding forces between L-selectin reconstituted in a polymer-cushioned lipid bilayer on the probe membrane and an antibody adsorbed on an atomic force microscope cantilever. Piconewton range forces between single pairs of interacting molecules were measured from the cantilever bending while using the membrane probe as an actuator. The integrated diffraction-based optical interferometer of the probe was demonstrated to have floor for frequencies as low as 3 Hz with a differential readout scheme. With soft probe membranes, this low noise level would be suitable for direct force measurements without the need for a cantilever. Furthermore, the probe membranes were shown to have 0.5 µm actuation range with a flat response up to 100 kHz, enabling measurements at fast speeds.

  8. Two Novel Measurements for the Drive-Mode Resonant Frequency of a Micromachined Vibratory Gyroscope

    Directory of Open Access Journals (Sweden)

    Ancheng Wang

    2013-11-01

    Full Text Available To investigate the drive-mode resonance frequency of a micromachined vibratory gyroscope (MVG, one needs to measure it accurately and efficiently. The conventional approach to measure the resonant frequency is by performing a sweep frequency test and spectrum analysis. The method is time-consuming and inconvenient because of the requirements of many test points, a lot of data storage and off-line analyses. In this paper, we propose two novel measurement methods, the search method and track method, respectively. The former is based on the magnitude-frequency characteristics of the drive mode, utilizing a one-dimensional search technique. The latter is based on the phase-frequency characteristics, applying a feedback control loop. Their performances in precision, noise resistivity and efficiency are analyzed through detailed simulations. A test system is implemented based on a field programmable gate array (FPGA and experiments are carried out. By comparing with the common approach, feasibility and superiorities of the proposed methods are validated. In particular, significant efficiency improvements are achieved whereby the conventional frequency method consumes nearly 5,000 s to finish a measurement, while only 5 s is needed for the track method and 1 s for the search method.

  9. On-chip micromachined dipole antenna with parasitic radiator for mm-wave wireless systems

    KAUST Repository

    Sallam, Mai O.; Serry, Mohamed; Shamim, Atif; Sedky, Sherif; Soliman, Ezzeldin A.

    2016-01-01

    In this paper, we present a micromachined dipole antenna with parasitic radiator. The antenna is designed for operation at 60 GHz. It consists of two Ig/2 dipole radiators fed by coplanar strips waveguide. Two slightly shorter dipoles are placed in proximity to the main radiators. They act as parasitic dipole arms which increase the bandwidth of the antenna. Two versions of the same antenna topology are presented in this paper in which one uses a high resistivity silicon substrate while the other uses a low resistivity one. The proposed antenna was optimized using HFSS and the final design was simulated using both HFSS and CST for verifying the obtained results. Both simulators are in good agreement. They show that the antenna has very good radiation characteristics where its directivity is around 7.5 dBi. The addition of the parasitic arms increased the bandwidth of the antenna from 1.3 GHz (3.62 GHz) to 4.3 GHz (7.44 GHz) when designed on high (low) resistivity silicon substrate.

  10. Sapphire capillaries for laser-driven wakefield acceleration in plasma. Fs-laser micromachining and characterization

    International Nuclear Information System (INIS)

    Schwinkendorf, Jan-Patrick

    2012-05-01

    Plasma wakefields are a promising approach for the acceleration of electrons with ultrahigh (10 to 100 GV/m) electric fields. Nowadays, high-intensity laser pulses are routinely utilized to excite these large-amplitude plasma waves. However, several detrimental effects such as laser diffraction, electron-wake dephasing and laser depletion may terminate the acceleration process. Two of these phenomena can be mitigated or avoided by the application of capillary waveguides, e.g. fabricated out of sapphire for longevity. Capillaries may compensate for laser diffraction like a fiber and allow for the creation of tapered gas-density profiles working against the dephasing between the accelerating wave and the particles. Additionally, they offer the possibility of controlled particle injection. This thesis is reporting on the set up of a laser for fs-micromachining of capillaries of almost arbitrary shapes and a test stand for density-profile characterization. These devices will permit the creation of tailored gas-density profiles for controlled electron injection and acceleration inside plasma.

  11. Complex three-dimensional structures in Si{1 0 0} using wet bulk micromachining

    International Nuclear Information System (INIS)

    Pal, Prem; Sato, Kazuo

    2009-01-01

    Complex three-dimensional structures for microelectromechanical systems (MEMS) are fabricated in Si{1 0 0} wafers using wet bulk micromachining. The structures are divided into two categories: fixed and freestanding. The fabrication processes for both types utilize single wafers with sequentially deposited nitride and oxide layers, local oxidation of silicon (LOCOS) and two steps of wet anisotropic etching. The fixed structures contain perfectly sharp edges. Thermally deposited oxide is used as the material for the freestanding structures. Wet etching is performed in tetramethyl ammonium hydroxide (TMAH) with and without Triton X-100 (C 14 H 22 O(C 2 H 4 O) n , n = 9–10). For the fixed structures, both etching steps are performed either in 25 wt% TMAH + Triton or pure TMAH or both, depending upon the type of the structures. In the case of freestanding systems, TMAH + Triton is utilized first, followed by pure TMAH. The fabrication methods enable densely arrayed structures, allowing the manufacture of corrugated diaphragms, compact size liquid (or gas) flow delivery systems, newly shaped mold for soft MEMS structures (e.g. PDMS (polydimethylsiloxane)) and other applications. The present research is an approach to fabricate advanced MEMS structures, extending the range of 3D structures fabricated by silicon anisotropic etching

  12. Modeling the Microstructure Curvature of Boron-Doped Silicon in Bulk Micromachined Accelerometer

    Directory of Open Access Journals (Sweden)

    Xiaoping He

    2013-01-01

    Full Text Available Microstructure curvature, or buckling, is observed in the micromachining of silicon sensors because of the doping of impurities for realizing certain electrical and mechanical processes. This behavior can be a key source of error in inertial sensors. Therefore, identifying the factors that influence the buckling value is important in designing MEMS devices. In this study, the curvature in the proof mass of an accelerometer is modeled as a multilayered solid model. Modeling is performed according to the characteristics of the solid diffusion mechanism in the bulk-dissolved wafer process (BDWP based on the self-stopped etch technique. Moreover, the proposed multilayered solid model is established as an equivalent composite structure formed by a group of thin layers that are glued together. Each layer has a different Young’s modulus value and each undergoes different volume shrinkage strain owing to boron doping in silicon. Observations of five groups of proof mass blocks of accelerometers suggest that the theoretical model is effective in determining the buckling value of a fabricated structure.

  13. On-chip micromachined dipole antenna with parasitic radiator for mm-wave wireless systems

    KAUST Repository

    Sallam, Mai O.

    2016-12-19

    In this paper, we present a micromachined dipole antenna with parasitic radiator. The antenna is designed for operation at 60 GHz. It consists of two Ig/2 dipole radiators fed by coplanar strips waveguide. Two slightly shorter dipoles are placed in proximity to the main radiators. They act as parasitic dipole arms which increase the bandwidth of the antenna. Two versions of the same antenna topology are presented in this paper in which one uses a high resistivity silicon substrate while the other uses a low resistivity one. The proposed antenna was optimized using HFSS and the final design was simulated using both HFSS and CST for verifying the obtained results. Both simulators are in good agreement. They show that the antenna has very good radiation characteristics where its directivity is around 7.5 dBi. The addition of the parasitic arms increased the bandwidth of the antenna from 1.3 GHz (3.62 GHz) to 4.3 GHz (7.44 GHz) when designed on high (low) resistivity silicon substrate.

  14. Wireless Displacement Sensing of Micromachined Spiral-Coil Actuator Using Resonant Frequency Tracking

    Directory of Open Access Journals (Sweden)

    Mohamed Sultan Mohamed Ali

    2014-07-01

    Full Text Available This paper reports a method that enables real-time displacement monitoring and control of micromachined resonant-type actuators using wireless radiofrequency (RF. The method is applied to an out-of-plane, spiral-coil microactuator based on shape-memory-alloy (SMA. The SMA spiral coil forms an inductor-capacitor resonant circuit that is excited using external RF magnetic fields to thermally actuate the coil. The actuation causes a shift in the circuit’s resonance as the coil is displaced vertically, which is wirelessly monitored through an external antenna to track the displacements. Controlled actuation and displacement monitoring using the developed method is demonstrated with the microfabricated device. The device exhibits a frequency sensitivity to displacement of 10 kHz/µm or more for a full out-of-plane travel range of 466 µm and an average actuation velocity of up to 155 µm/s. The method described permits the actuator to have a self-sensing function that is passively operated, thereby eliminating the need for separate sensors and batteries on the device, thus realizing precise control while attaining a high level of miniaturization in the device.

  15. Sapphire capillaries for laser-driven wakefield acceleration in plasma. Fs-laser micromachining and characterization

    Energy Technology Data Exchange (ETDEWEB)

    Schwinkendorf, Jan-Patrick

    2012-08-15

    Plasma wakefields are a promising approach for the acceleration of electrons with ultrahigh (10 to 100 GV/m) electric fields. Nowadays, high-intensity laser pulses are routinely utilized to excite these large-amplitude plasma waves. However, several detrimental effects such as laser diffraction, electron-wake dephasing and laser depletion may terminate the acceleration process. Two of these phenomena can be mitigated or avoided by the application of capillary waveguides, e.g. fabricated out of sapphire for longevity. Capillaries may compensate for laser diffraction like a fiber and allow for the creation of tapered gas-density profiles working against the dephasing between the accelerating wave and the particles. Additionally, they offer the possibility of controlled particle injection. This thesis is reporting on the set up of a laser for fs-micromachining of capillaries of almost arbitrary shapes and a test stand for density-profile characterization. These devices will permit the creation of tailored gas-density profiles for controlled electron injection and acceleration inside plasma.

  16. Surface Contaminant Control Technologies to Improve Laser Damage Resistance of Optics

    Directory of Open Access Journals (Sweden)

    Xiaofeng Cheng

    2014-01-01

    Full Text Available The large high-power solid lasers, such as the National Ignition Facility (NIF of America and the Shenguang-III (SG-III laser facility of China, can output over 2.1 MJ laser pulse for the inertial confinement fusion (ICF experiments. Because of the enhancement of operating flux and the expansion of laser driver scale, the problem of contamination seriously influences their construction period and operation life. During irradiation by intense laser beams, the contaminants on the metallic surface of beam tubes can be transmitted to the optical surfaces and lead to damage of optical components. For the high-power solid-state laser facilities, contamination control focuses on the slab amplifiers, spatial filters, and final-optical assemblies. In this paper, an effective solution to control contaminations including the whole process of the laser driver is put forward to provide the safe operation of laser facilities, and the detailed technical methods of contamination control such as washing, cleanliness metrology, and cleanliness protecting are also introduced to reduce the probability of laser-induced damage of optics. The experimental results show that the cleanliness level of SG-III laser facility is much better to ensure that the laser facility can safely operate at high energy flux.

  17. Prospects for the Development of Innovative Technology of Supersonic Gas-Powder Surfacing Coatings from Alloys of the System Ni-Cr-B-Si

    Science.gov (United States)

    Radchenko, Mikhail V.; Kiselev, Vadim S.; Shevtsov, Yuri O.; Radchenko, Tatyana B.

    2017-10-01

    The article is devoted to the research and development of technological recommendations of supersonic gas-powder surfacing, an example of the practical use of the developed technology is given. Market research indicates that demand for these products is stable due to the growing quality requirements of components and parts produced by the largest machine-building enterprises of Russia.

  18. 酵母细胞表面展示技术%Recent Advances in Yeast Cell-Surface Display Technology

    Institute of Scientific and Technical Information of China (English)

    王佳堃; 孙中远; 刘建新

    2011-01-01

    酵母细胞表达体系具备较为完善的蛋白质翻译后修饰和分泌的机制.以酵母为基础的细胞表面展示技术是一项新兴的真核蛋白展示技术,已成功应用于蛋白质识别、蛋白质的固定化和定向进化研究,成为了蛋白质工程研究的重要工具.根据与酵母细胞壁的外源目的蛋白融合部位的不同,酿酒酵母表面展示系统主要分为凝集素系统和絮凝素系统2大系统.将该技术引入动物营养研究领域,有望通过诱导宿主产生原虫或甲烷菌的抗体,对瘤胃微生态进行调控,从而以减少甲烷排放;生产高活性的全细胞催化剂,以提高反刍动物和单胃动物对纤维物质的利用效率.为此,本文就该技术的原理、特点和应用领域进行了综述.%Yeast cell has a perfect system for protein post-translational modification and secretion. The cell surface display technology based on yeast is a novel eukaryotic protein display technology. It has been successfully used for protein recognition, immobilization and remediation, and becomes an important tool for the study of protein engineering. Yeast cell surface display technology is divided into two systems, which are agglutinin and flocculin, according to the different insertion sites of the yeast cell wall for target heterologous proteins. If introduced to animal nutrition research, this technology will be a promising strategy to reduce the methane production by the regulation on ruminal microbial ecology, which is inducing of production of antibodies for protozoa and methanogen in host; highly active whole cell biocatalysts will be produced by increasing fiber utilization in ruminant and monogastric animal. Therefore, mechanism, characteristic and application of the technology are reviewed in this paper.

  19. Current Laser Resurfacing Technologies: A Review that Delves Beneath the Surface

    Science.gov (United States)

    Preissig, Jason; Hamilton, Kristy; Markus, Ramsey

    2012-01-01

    Numerous laser platforms exist that rejuvenate the skin by resurfacing its upper layers. In varying degrees, these lasers improve the appearance of lentigines and rhytides, eliminate photoaging, soften scarring due to acne and other causes, and treat dyspigmentation. Five major classes of dermatologic lasers are currently in common use: ablative and nonablative lasers in both fractionated and unfractionated forms as well as radiofrequency technologies. The gentler nonablative lasers allow for quicker healing, whereas harsher ablative lasers tend to be more effective. Fractionating either laser distributes the effect, increasing the number of treatments but minimizing downtime and complications. In this review article, the authors seek to inform surgeons about the current laser platforms available, clarify the differences between them, and thereby facilitate the identification of the most appropriate laser for their practice. PMID:23904818

  20. Surface reflectance and conversion efficiency dependence of technologies for mitigating global warming

    Energy Technology Data Exchange (ETDEWEB)

    Edmonds, Ian [Solartran Pty Ltd., 12 Lentara St, Kenmore, Brisbane 4069 (Australia); Smith, Geoff [Physics and Advanced Materials, University of Technology, Sydney, PO Box 123, Broadway, New South Wales 2007 (Australia)

    2011-05-15

    A means of assessing the relative impact of different renewable energy technologies on global warming has been developed. All power plants emit thermal energy to the atmosphere. Fossil fuel power plants also emit CO{sub 2} which accumulates in the atmosphere and provides an indirect increase in global warming via the greenhouse effect. A fossil fuel power plant may operate for some time before the global warming due to its CO{sub 2} emission exceeds the warming due to its direct heat emission. When a renewable energy power plant is deployed instead of a fossil fuel power plant there may be a significant time delay before the direct global warming effect is less than the combined direct and indirect global warming effect from an equivalent output coal fired plant - the ''business as usual'' case. Simple expressions are derived to calculate global temperature change as a function of ground reflectance and conversion efficiency for various types of fossil fuelled and renewable energy power plants. These expressions are used to assess the global warming mitigation potential of some proposed Australian renewable energy projects. The application of the expressions is extended to evaluate the deployment in Australia of current and new geo-engineering and carbon sequestration solutions to mitigate global warming. Principal findings are that warming mitigation depends strongly on the solar to electric conversion efficiency of renewable technologies, geo-engineering projects may offer more economic mitigation than renewable energy projects and the mitigation potential of reforestation projects depends strongly on the location of the projects. (author)