WorldWideScience

Sample records for surface micromachining process

  1. Integrated mold/surface-micromachining process

    Energy Technology Data Exchange (ETDEWEB)

    Barron, C.C.; Fleming, J.G.; Montague, S.; Sniegowski, J.J.; Hetherington, D.L.

    1996-03-01

    We detail a new monolithically integrated silicon mold/surface-micromachining process which makes possible the fabrication of stiff, high-aspect-ratio micromachined structures integrated with finely detailed, compliant structures. An important example, which we use here as our process demonstration vehicle, is that of an accelerometer with a large proof mass and compliant suspension. The proof mass is formed by etching a mold into the silicon substrate, lining the mold with oxide, filling it with mechanical polysilicon, and then planarizing back to the level of the substrate. The resulting molded structure is recessed into the substrate, forming a planar surface ideal for subsequent processing. We then add surface-micromachined springs and sense contacts. The principal advantage of this new monolithically integrated mold/surface-micromachining process is that it decouples the design of the different sections of the device: In the case of a sensitive accelerometer, it allows us to optimize independently the proof mass, which needs to be as large, stiff, and heavy as possible, and the suspension, which needs to be as delicate and compliant as possible. The fact that the high-aspect-ratio section of the device is embedded in the substrate enables the monolithic integration of high-aspect-ratio parts with surface-micromachined mechanical parts, and, in the future, also electronics. We anticipate that such an integrated mold/surface micromachining/electronics process will offer versatile high-aspect-ratio micromachined structures that can be batch-fabricated and monolithically integrated into complex microelectromechanical systems.

  2. Stiction in surface micromachining

    NARCIS (Netherlands)

    Tas, Niels Roelof; Sonnenberg, A.H.; Jansen, Henricus V.; Legtenberg, R.; Legtenberg, Rob; Elwenspoek, Michael Curt

    1996-01-01

    Due to the smoothness of the surfaces in surface micromachining, large adhesion forces between fabricated structures and the substrate are encountered. Four major adhesion mechanisms have been analysed: capillary forces, hydrogen bridging, electrostatic forces and van der Waals forces. Once contact

  3. Effects of Micromachining Processes on Electro-Osmotic Flow Mobility of Glass Surfaces

    Directory of Open Access Journals (Sweden)

    Norihisa Miki

    2013-03-01

    Full Text Available Silica glass is frequently used as a device material for micro/nano fluidic devices due to its excellent properties, such as transparency and chemical resistance. Wet etching by hydrofluoric acid and dry etching by neutral loop discharge (NLD plasma etching are currently used to micromachine glass to form micro/nano fluidic channels. Electro-osmotic flow (EOF is one of the most effective methods to drive liquids into the channels. EOF mobility is affected by a property of the micromachined glass surfaces, which includes surface roughness that is determined by the manufacturing processes. In this paper, we investigate the effect of micromaching processes on the glass surface topography and the EOF mobility. We prepared glass surfaces by either wet etching or by NLD plasma etching, investigated the surface topography using atomic force microscopy, and attempted to correlate it with EOF generated in the micro-channels of the machined glass. Experiments revealed that the EOF mobility strongly depends on the surface roughness, and therefore upon the fabrication process used. A particularly strong dependency was observed when the surface roughness was on the order of the electric double layer thickness or below. We believe that the correlation described in this paper can be of great help in the design of micro/nano fluidic devices.

  4. A novel surface micromachining process to fabricate AlN unimorph suspensions and its application for RF resonators

    NARCIS (Netherlands)

    Saravanan, S.; Saravanan, S.; Berenschot, Johan W.; Krijnen, Gijsbertus J.M.; Elwenspoek, Michael Curt

    2006-01-01

    A novel surface micromachining process is reported for aluminum nitride (AlN) thin films to fabricate piezoelectric unimorph suspension devices for micro actuator applications. Wet anisotropic etching of AlN thin film is used with a Cr metal mask layer in the microfabrication process. Tetra methyl

  5. Surface Micromachining Process for the Integration of AlN Piezoelectric Microstructures

    NARCIS (Netherlands)

    Saravanan, S.; Berenschot, Johan W.; Krijnen, Gijsbertus J.M.; Elwenspoek, Michael Curt

    2004-01-01

    We report a novel micromachining process to fabricate AlN (Aluminum Nitride) piezoelectric microstructures for actuator applications. Piezoelectric AlN thin films can be grown with (002) preferential orientation by means of RF reactive sputtering on various substrates. For this study, AlN was

  6. Design of Surface Micromachined Compliant MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Bradley, Joe Anthony [Iowa State Univ., Ames, IA (United States)

    2002-12-31

    The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a micro-compliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMs, most have used comb-drive actuation methods and bulk micromachining processes. This research focused on fully-compliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms.

  7. Design of Surface micromachined Compliant MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Bradley, Joe Anthony [Iowa State Univ., Ames, IA (United States)

    2001-01-01

    The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a micro-compliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMS, most have used comb-drive actuation methods and bulk micromachining processes. This research focuses on fully-compliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms.

  8. Enhancing cavitation with micromachined surfaces

    Science.gov (United States)

    Fernandez Rivas, David; Stricker, Laura; Zijlstra, Aaldert G.; Gardeniers, Han; Lohse, Detlef; Prosperetti, Andrea; Mesoscale Chemical System Group Collaboration; Physics of Fluids Group Collaboration; Department of Mechanical Engineering Collaboration

    2012-11-01

    When a silicon surface with micromachined pits submerged in a liquid is exposed to continuous ultrasound at 200 kHz, bubbles are ejected from the air filled cavities. Depending on the pressure amplitude different scenarios are observed, as the bubbles ejected from the micropits interact in complex ways with each other, and with the silicon surface. We have determined the size distribution of bubbles ejected from one, two and three pits for three different electrical power settings, and correlated them with sonochemical OH* radical production. Numerical simulations of the sonochemical conversion reaction rates were obtained using the empirical bubble size distributions and are compared with experimental results. Experimental evidence of shock wave emission from the microbubble clusters, deformed microbubble shapes, jetting and surface erosion are also presented. Financially supported through the project 07391 of the Technology Foundation STW, The Netherlands.

  9. Tribological issues of polysilicon surface-micromachining

    Energy Technology Data Exchange (ETDEWEB)

    Sniegowski, J.J.

    1997-12-01

    Polysilicon surface-micromachining is a Micro-Electro-Mechanical Systems (MEMS) manufacturing technology where the infrastructure for manufacturing silicon integrated circuits is used to fabricate micro-miniature mechanical devices. This presentation describes a multi-level mechanical polysilicon surface-micromachining technology and includes a discussion of the issues which affect device manufacture and performance. The multi-level technology was developed and is employed primarily to fabricate microactuated mechanisms. The intricate and complex motion offered by these devices is naturally accompanied by various forms of fraction and wear in addition to the classical stiction phenomena associated with micromechanical device fabrication and usage.

  10. Multi-layer enhancement to polysilicon surface-micromachining technology

    Energy Technology Data Exchange (ETDEWEB)

    Sniegowski, J.J.; Rodgers, M.S. [Sandia National Labs., Albuquerque, NM (United States). Intelligent Micromachine Dept.

    1997-10-01

    A multi-level polysilicon surface-micromachining technology consisting of 5 layers of polysilicon is presented. Surface topography and film mechanical stress are the major impediments encountered in the development of a multilayer surface-micromachining process. However, excellent mechanical film characteristics have been obtained through the use of chemical-mechanical polishing for planarization of topography and by proper sequencing of film deposition with thermal anneals. Examples of operating microactuators, geared power-transfer mechanisms, and optical elements demonstrate the mechanical advantages of construction with 5 polysilicon layers.

  11. A versatile multi-user polyimide surface micromachinning process for MEMS applications

    KAUST Repository

    Carreno, Armando Arpys Arevalo

    2015-04-01

    This paper reports a versatile multi-user micro-fabrication process for MEMS devices, the \\'Polyimide MEMS Multi-User Process\\' (PiMMPs). The reported process uses polyimide as the structural material and three separate metallization layers that can be interconnected depending on the desired application. This process enables for the first time the development of out-of-plane compliant mechanisms that can be designed using six different physical principles for actuation and sensing on a wafer from a single fabrication run. These principles are electrostatic motion, thermal bimorph actuation, capacitive sensing, magnetic sensing, thermocouple-based sensing and radio frequency transmission and reception. © 2015 IEEE.

  12. Modeling Grinding Processes as Micro-Machining Operation ...

    African Journals Online (AJOL)

    A computational based model for surface grinding process as a micro-machined operation has been developed. In this model, grinding forces are made up of chip formation force and sliding force. Mathematical expressions for Modeling tangential grinding force and normal grinding force were obtained. The model was ...

  13. Physics-based signal processing algorithms for micromachined cantilever arrays

    Science.gov (United States)

    Candy, James V; Clague, David S; Lee, Christopher L; Rudd, Robert E; Burnham, Alan K; Tringe, Joseph W

    2013-11-19

    A method of using physics-based signal processing algorithms for micromachined cantilever arrays. The methods utilize deflection of a micromachined cantilever that represents the chemical, biological, or physical element being detected. One embodiment of the method comprises the steps of modeling the deflection of the micromachined cantilever producing a deflection model, sensing the deflection of the micromachined cantilever and producing a signal representing the deflection, and comparing the signal representing the deflection with the deflection model.

  14. Manufacturing microsystems-on-a-chip with 5-level surface micromachining technology

    Energy Technology Data Exchange (ETDEWEB)

    Sniegowski, J.; Rodgers, M.S.

    1998-05-01

    An agile microsystem manufacturing technology has been developed that provides unprecedented 5 levels of independent polysilicon surface-micromachine films for the designer. Typical surface-micromachining processes offer a maximum of 3 levels, making this the most complex surface-micromachining process technology developed to date. Leveraged from the extensive infrastructure present in the microelectronics industry, the manufacturing method of polysilicon surface-micromachining offers similar advantages of high-volume, high-reliability, and batch-fabrication to microelectromechanical systems (MEMS) as has been accomplished with integrated circuits (ICs). These systems, comprised of microscopic-sized mechanical elements, are laying the foundation for a rapidly expanding, multi-billion dollar industry 2 which impacts the automotive, consumer product, and medical industries to name only a few.

  15. Surface Micromachined Arrays of Transition-Edge Detectors, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — An innovative surface micromachining technique is described for the fabrication of closely-packed arrays of transition edge sensor (TES) x-ray microcalorimeters....

  16. Simulation and optimization of a micromachined gyroscope using high-aspect-ratio micromachining fabrication process

    Science.gov (United States)

    Ruan, Aiwu Y.; Tse, Man S.; Chong, Gang Y.

    2001-11-01

    Micromachined gyroscopes rely on tuned vibration mode frequencies to measure rotation rates and typically have complex modes of vibration for the mechanical microstructures. Although there are many reports on how to exactly tune the drive and sense modes of vibration to maximize sensitivity of micromachined gyroscope, there are only few reports on the detailed analysis of modes of vibration. Modes of vibration are strongly dependent on the design parameters of the mechanical structure of the gyroscope including the dimension of the proof mass, types and dimensions of the suspension, and residual mechanical stress of the high aspect-ratio polysilicon film used to form the microstructures of the micromachined gyroscope. In this paper, an electrostatic drive and capacitive sense in-plane decoupled gyroscope for measuring vertical angular velocity is proposed to study the effects of the geometrical variables on modes of vibration. Finite-element analysis (FEA) simulation was performed on simplifiedmodel of the in-plane decoupled micromachined gyroscope microstructure. For optimal result the drive-mode and sense-mode suspensions of the micromachined gyroscope should be fabricated from thick polysilicon microstructure to give large aspect ratio suspension systems for the in-plane decoupled micromachined gyroscope. Folded-beam suspension design is recommended for the drive-mode suspension in order to relieve the residual stress of the thick polysilicon film for high aspect-ratio micromachine dgyroscope. It is critical to control the process variations of the suspension beam dimension, especially the beam width variation in order to achieve the goal of accurately control resonant frequencies of micromachined gyrocope.

  17. Macrodesign for microdevices: Polysilicon surface-micromachining technology, applications and issues

    Energy Technology Data Exchange (ETDEWEB)

    Sniegowski, J.J. [Sandia National Labs., Albuquerque, NM (United States). Intelligent Micromachine Dept.

    1997-05-01

    The intent of this tutorial is to overview the technology of multi-level polysilicon surface micromachining, to present examples of devices which fully utilize this level of complexity, and to discuss what they believe to be significant issues which are not fully resolved. Following this intent, the tutorial consists of four sections. The first is an introduction and description of multi-level polysilicon surface micromachining and its potential benefits. Specifically, the inclusion of a third deposited layer of mechanical polysilicon greatly extends the degree of complexity available for micromechanism design. The second section introduces wafer planarization by CMP as a process tool for surface micromachining. The third section presents examples of actuated geared micromechanisms which require the multi-level fabrication process. Demonstration of actuation mechanisms coupled to external devices are illustrated. Finally, polysilicon surface micromachining fabrication technology has reached a level where many device designs, for the most part, can be embodied in the technology to produce a mechanical construct which provides the desired function. When designed properly, the fabricated mechanical element, if free to operate, will produce the desired function. However, one set of issues which can hinder or prevent operation are related to the post-fabricated device surfaces. These surface issues; namely, stiction, friction, and wear, are emphasized in the final section as a major hindrance to realizing the full potential of surface micromachined devices.

  18. Analysis and prediction of dimensions and cost of laser micro-machining internal channel fabrication process

    Directory of Open Access Journals (Sweden)

    Brabazon D.

    2010-06-01

    Full Text Available This paper presents the utilisation of Response Surface Methodology (RSM as the prediction tool for the laser micro-machining process. Laser internal microchannels machined using pulsed Nd:YVO4 laser in polycarbonate were investigated. The experiments were carried out according to 33 factorial Design of Experiment (DoE. In this work the three input process set as control parameters were laser power, P; pulse repetition frequency, PRF; and sample translation speed, U. Measured responses were the channel width and the micro-machining operating cost per metre of produced microchannels. The responses were sufficiently predicted within the set micro-machining parameters limits. Two factorial interaction (2FI and quadratic polynomial regression equations for both responses were constructed. It is proposed that the developed prediction equations can be used to find locally optimal micro-machining process parameters under experimental and operational conditions.

  19. Non-traditional micromachining processes fundamentals and applications

    CERN Document Server

    Bhattacharyya, B; Davim, J

    2017-01-01

    This book presents a complete coverage of micromachining processes from their basic material removal phenomena to past and recent research carried by a number of researchers worldwide. Chapters on effective utilization of material resources, improved efficiency, reliability, durability, and cost effectiveness of the products are presented. This book provides the reader with new and recent developments in the field of micromachining and microfabrication of engineering materials.

  20. A manufacturing method for multi-layer polysilicon surface-micromachining technology

    Energy Technology Data Exchange (ETDEWEB)

    Sniegowski, J.J.; Rodgers, M.S.

    1998-01-01

    An advanced manufacturing technology which provides multi-layered polysilicon surface micromachining technology for advanced weapon systems is presented. Specifically, the addition of another design layer to a 4 levels process to create a 5 levels process allows consideration of fundamentally new architecture in designs for weapon advanced surety components.

  1. Condensation of sodium on a micromachined surface for AMTEC

    International Nuclear Information System (INIS)

    Crowley, C.J.; Izenson, M.G.

    1993-01-01

    A novel condenser component is being developed to enable Alkali Metal Thermal to Electric Conversion (AMTEC) technology to achieve two critical goals: (1) optimization of conversion efficiency and (2) microgravity fluid management. The first goal is achieved by minimizing parasitic radiation heat transfer losses for condensers with a large view factor to the high-temperature β double-prime-alumina surface. The condenser geometry includes a specially designed, micromachined surface where large capillary forces are used to manage the fluid distribution to accomplish the second goal. We present and discuss the results of separate effects experiments investigating the wetting and condensation behavior of sodium on this capillary surface. Test results show that the micromachined surface maintains a smooth, high reflective film of liquid sodium on the surface, which implies reduced parasitic losses and increased conversion efficiencies in AMTEC cells. Accomplishing this in an adverse gravity gradient demonstrates the potential for management of the fluid even under spacecraft acceleration conditions

  2. Fabrication of surface micromachined ain piezoelectric microstructures and its potential apllication to rf resonators

    NARCIS (Netherlands)

    Saravanan, S.; Saravanan, S.; Berenschot, Johan W.; Krijnen, Gijsbertus J.M.; Elwenspoek, Michael Curt

    2005-01-01

    We report on a novel microfabrication method to fabricate aluminum nitride (AlN) piezoelectric microstructures down to 2 microns size by a surface micromachining process. Highly c-axis oriented AlN thin films are deposited between thin Cr electrodes on polysilicon structural layers by rf reactive

  3. Surface micromachined fabrication of piezoelectric ain unimorph suspension devices for rf resonator applications

    NARCIS (Netherlands)

    Saravanan, S.; Saravanan, S.; Berenschot, Johan W.; Krijnen, Gijsbertus J.M.; Elwenspoek, Michael Curt

    We report a surface micromachining process for aluminum nitride (AlN) thin films to fabricate piezoelectric unimorph suspension devices for actuator applications. Polysilicon is used as a structural layer. Highly c-axis oriented AlN thin films 1 /spl mu/m thick are deposited by rf reactive

  4. Planar silicon fabrication process for high-aspect-ratio micromachined parts

    Energy Technology Data Exchange (ETDEWEB)

    Barron, C.C.; Fleming, J.G. [Sandia National Labs., Albuquerque, NM (United States). Microelectronics Development Lab.

    1997-09-01

    Surface-micromachined silicon inertial sensors are limited to relatively high-G applications in part because of the fundamental limitations on proof mass imposed by the manufacturing technology. At the same time, traditional micromolding technologies such as LIGA do not lend themselves to integration with electronics, a capability which is equally necessary for high-performance inertial sensors. The silicon micromolding processes described in this report promise to offer both larger proof masses and integrability with on-chip electronics. In Sandia`s silicon micromolding process, the proof mass is formed using a mold which is first recessed into the substrate using a deep silicon trench etch, then lined with a sacrificial or etch-stop layer, and filled with mechanical polysilicon. Since the mold is recessed into the substrate, the whole micromechanical structure can be formed, planarized, and integrated with standard silicon microelectronic circuits before the release etch. In addition, unlike surface-micromachined parts, the thickness of the molded parts is limited by the depth of the trench etch (typically 10--50 {micro}m) rather than the thickness of deposited polysilicon (typically 2 {micro}m). The fact that the high-aspect-ratio section of the device is embedded in the substrate enables the monolithic integration of high-aspect-ratio parts with surface-micromachined mechanical parts, and, in the future, also electronics. The authors anticipate that such an integrated mold/surface micromachining/electronics process will offer versatile high-aspect-ratio micromachined structures that can be batch-fabricated and monolithically integrated into complex microelectromechanical systems including high-performance inertial sensing systems.

  5. Novel silicon fabrication process for high-aspect-ratio micromachined parts

    Energy Technology Data Exchange (ETDEWEB)

    Fleming, J.G.; Barron, C.C.

    1995-08-01

    Bulk micromachining generally refers to processes involving wet chemical etching of structures formed out of the silicon substrate and so is limited to fairly large, crude structures. Surface micromachining allows intricate patterning of thin films of polysilicon and other materials to form essentially two-dimensional layered parts (since the thickness of the parts is limited by the thickness of the deposited films). There is a third type of micromachining in which the part is formed by filling a mold which was defined by photolithographic means. Historically micromachining molds have been formed in some sort of photopolymer, be it with x-ray lithography (``LIGA``) or more conventional UV lithography, with the aim of producing piece parts. Recently, however, several groups including ours at Sandia have independently come up with the idea of forming the mold for mechanical parts by etching into the silicon substrate itself. In Sandia`s mold process, the mold is recessed into the substrate using a deep silicon trench etch, lined with a sacrificial or etch-stop layer, and then filled with any of a number of mechanical materials. The completed structures are not ejected from the mold to be used as piece parts rather, the mold is dissolved from around selected movable segments of the parts, leaving the parts anchored to the substrate. Since the mold is recessed into the substrate, the whole micromechanical structure can be formed, planarized, and integrated with standard silicon microelectronic circuits before the release etch. In addition, unlike surface-micromachined parts, the thickness of the molded parts is limited by the depth of the trench etch (typically 10--50 {mu}m) rather than the thickness of deposited polysilicon (typically 2 {mu}m). The capability of fabricating thicker (and therefore much stiffer and more massive) parts is critical for motion-sensing structures involving large gimballed platforms, proof masses, etc.

  6. Surface micromachined counter-meshing gears discrimination device

    International Nuclear Information System (INIS)

    Polosky, M.A.; Garcia, E.J.; Allen, J.J.

    1998-01-01

    This paper discusses the design, fabrication and testing of a surface micromachined Counter-Meshing Gears (CMG) discrimination device which functions as a mechanically coded lock, A 24 bit code is input to unlock the device. Once unlocked, the device provides a path for an energy or information signal to pass through the device. The device is designed to immediately lock up if any portion of the 24 bit code is incorrect. The motivation for the development of this device is based on occurrences referred to as High Consequence Events, A High Consequence Event is an event where an inadvertent operation of a system could result in the catastrophic loss of life, property, or damage to the environment

  7. Fabrication and simulation of glass micromachining using CO2 laser processing with PDMS protection

    Science.gov (United States)

    Chung, C. K.; Lin, S. L.; Wang, H. Y.; Tan, T. K.; Tu, K. Z.; Lung, H. F.

    2013-11-01

    Traditional glass micromachining using laser processing in air would produce many kinds of defects, such as bulges, debris, micro-cracks and scorches. In this article, a poly-dimethylsiloxane (PDMS) protection processing has been presented to reduce the temperature gradient and heat-affected zone (HAZ) to achieve crack-free Pyrex glass machining. A good quality of etched surface which is a clear and much-reduced bulge without crack and scorch is achieved using CO2 laser micromachining at 150 μm thick PDMS protection layer and the laser powers of 10-15 W and scanning speeds of 228-342 mm/s for five passes. The PDMS cover layer benefits feature size and bulge height reduction. The alpha-step measured profile shows that the much reduced bulge height around the rims of channel was about 1.2 μm at 150 μm thick PDMS about 13 times smaller than that in air. The ANSYS software was used to analyze the temperature distribution and thermal stress field of glass micromachining in air without and with PDMS cover layer. The smaller temperature gradient observed in PDMS protection processing has the smaller HAZ and diminishes the crack formation during the laser processing.

  8. Optical micro-metrology of structured surfaces micro-machined by jet-ECM

    DEFF Research Database (Denmark)

    Quagliotti, Danilo; Tosello, Guido; Islam, Aminul

    2015-01-01

    A procedure for statistical analysis and uncertainty evaluation is presented with regards to measurements of step height and surface texture. Measurements have been performed with a focus-variation microscope over jet electrochemical micro-machined surfaces. Traceability has been achieved using...

  9. First reliability test of a surface micromachined microengine using SHiMMeR

    Energy Technology Data Exchange (ETDEWEB)

    Tanner, D.M.; Smith, N.F.; Bowman, D.J. [and others

    1997-08-01

    The first-ever reliability stress test on surface micromachined microengines developed at Sandia National Laboratories (SNL) has been completed. We stressed 41 microengines at 36,000 RPM and inspected the functionality at 60 RPM. We have observed an infant mortality region, a region of low failure rate (useful life), and no signs of wearout in the data. The reliability data are presented and interpreted using standard reliability methods. Failure analysis results on the stressed microengines are presented. In our effort to study the reliability of MEMS, we need to observe the failures of large numbers of parts to determine the failure modes. To facilitate testing of large numbers of micromachines. The Sandia High Volume Measurement of Micromachine Reliability (SHiMMeR) system has computer controlled positioning and the capability to inspect moving parts. The development of this parallel testing system is discussed in detail.

  10. A batch process micromachined thermoelectric energy harvester: Fabrication and characterization

    NARCIS (Netherlands)

    Su, J.; Leonov, V.; Goedbloed, M.; Andel, Y. van; Nooijer, M.C.de; Elfrink, R.; Wang, Z.; Vullers, R.J.M.

    2010-01-01

    Micromachined thermopiles are considered as a cost-effective solution for energy harvesters working at a small temperature difference and weak heat flows typical for, e.g., the human body. They can be used for powering autonomous wireless sensor nodes in a body area network. In this paper, a

  11. Thermal simulation of surface micromachined polysilicon hot plates of low power consumption

    NARCIS (Netherlands)

    Dumitrescu, Marius; Cobianu, Cornel; Lungu, Dan; Pascu, Adrian; Kolev, Spas; van den Berg, Albert

    1999-01-01

    A simple, IC compatible, surface micromachined polysilicon membrane was technologically designed and thermally simulated by 3D finite element ‘COSMOS' program in order to investigate its capability to work as a micro hot plate for a gas sensing test structure of low power consumption. For an

  12. The Effect of Humidity on the Reliability of a Surface Micromachined Microengine

    Energy Technology Data Exchange (ETDEWEB)

    Dugger, M.T.; Eaton, W.P.; Irwin, L.W.; Miller, S.L.; Miller, W.M.; Smith, N.F.; Tanner, D.M.; Walraven, J.A.

    1999-02-02

    Humidity is shown to be a strong factor in the wear of rubbing surfaces in polysilicon micromachines. We demonstrate that very low humidity can lead to very high wear without a significant change in reliability. We show that the volume of wear debris generated is a function of the humidity in an air environment. As the humidity decreases, the wear debris generated increases. For the higher humidity levels, the formation of surface hydroxides may act as a lubricant. The dominant failure mechanism has been identified as wear. The wear debris has been identified as amorphous oxidized silicon. Large slivers (approximately 1 micron in length) of debris observed at the low humidity level were also amorphous oxidized silicon. Using transmission electron microscopy, we observed that the wear debris forms spherical and rod-like shapes. We compared two surface treatment processes: a fluorinated si- lane chain, (FITl) and supercritical C02 dried (SCC02). The microengines using the SCC02 process were found to be less reliable than those released with the FIX process under two humidity levels.

  13. Effect of fluorocarbon self-assembled monolayer films on sidewall adhesion and friction of surface micromachines with impacting and sliding contact interfaces

    International Nuclear Information System (INIS)

    Xiang, H.; Komvopoulos, K.

    2013-01-01

    A self-assembled monolayer film consisting of fluoro-octyltrichlorosilane (FOTS) was vapor-phase deposited on Si(100) substrates and polycrystalline silicon (polysilicon) surface micromachines. The hydrophobic behavior and structural composition of the FOTS film deposited on Si(100) were investigated by goniometry and X-ray photoelectron spectroscopy, respectively. The effects of contact pressure, relative humidity, temperature, and impact/sliding cycles on the adhesive and friction behavior of uncoated and FOTS-coated polysilicon micromachines (referred to as the Si and FOTS/Si micromachines, respectively) were investigated under controlled loading and environmental conditions. FOTS/Si micromachines demonstrated much lower and stable adhesion than Si micromachines due to the highly hydrophobic and conformal FOTS film. Contrary to Si micromachines, sidewall adhesion of FOTS/Si micromachines demonstrated a weak dependence on relative humidity, temperature, and impact cycles. In addition, FOTS/Si micromachines showed low and stable adhesion and low static friction for significantly more sliding cycles than Si micromachines. The adhesive and static friction characteristics of Si and FOTS/Si micromachines are interpreted in the context of physicochemical surface changes, resulting in the increase of the real area of contact and a hydrophobic-to-hydrophilic transition of the surface chemical characteristics caused by nanoscale surface smoothening and the removal of the organic residue (Si micromachines) or the FOTS film (FOTS/Si micromachines) during repetitive impact and oscillatory sliding of the sidewall surfaces.

  14. Enhancing structural integrity of adhesive bonds through pulsed laser surface micro-machining

    KAUST Repository

    Diaz, Edwin Hernandez

    2015-06-01

    Enhancing the effective peel resistance of plastically deforming adhesive joints through laser-based surface micro-machining Edwin Hernandez Diaz Inspired by adhesion examples commonly found in nature, we reached out to examine the effect of different kinds of heterogeneous surface properties that may replicate this behavior and the mechanisms at work. In order to do this, we used pulsed laser ablation on copper substrates (CuZn40) aiming to increase adhesion for bonding. A Yb-fiber laser was used for surface preparation of the substrates, which were probed with a Scanning Electron Microscope (SEM) and X-ray Photoelectron Spectroscopy (XPS). Heterogeneous surface properties were devised through the use of simplified laser micromachined patterns which may induce sequential events of crack arrest propagation, thereby having a leveraging effect on dissipation. The me- chanical performance of copper/epoxy joints with homogeneous and heterogeneous laser micromachined interfaces was then analyzed using the T-peel test. Fractured surfaces were analyzed using SEM to resolve the mechanism of failure and adhesive penetration within induced surface asperities from the treatment. Results confirm positive modifications of the surface morphology and chemistry from laser ablation that enable mechanical interlocking and cohesive failure within the adhesive layer. Remarkable improvements of apparent peel energy, bond toughness, and effective peel force were appreciated with respect to sanded substrates as control samples.

  15. Development of a Surface Micromachined On-Chip Flat Disk Micropump

    Directory of Open Access Journals (Sweden)

    M. I. KILANI

    2009-08-01

    Full Text Available The paper presents research progress in the development of a surface micromachined flat disk micropump which employs the viscous and centrifugal effects acting on a layer of fluid sandwiched between a rotating flat disk and a stationary plate. The pump is fabricated monolithically on-chip using Sandia’s Ultraplanar Multilevel MEMS Technology (SUMMiT™ where an electrostatic comb-drive Torsional Ratcheting Actuator (TRA drives the flat disk through a geared transmission. The paper reviews available analytical models for flow geometries similar to that of the described pump, and presents a set of experiments which depict its performance and possible failure modes. Those experiments highlight future research directions in the development of electrostatically-actuated, CMOS-compatible, surface micromachined pumps.

  16. A wafer mapping technique for residual stress in surface micromachined films

    International Nuclear Information System (INIS)

    Schiavone, G; Murray, J; Smith, S; Walton, A J; Desmulliez, M P Y; Mount, A R

    2016-01-01

    The design of MEMS devices employing movable structures is crucially dependant on the mechanical behaviour of the deposited materials. It is therefore important to be able to fully characterize the micromachined films and predict with confidence the mechanical properties of patterned structures. This paper presents a characterization technique that enables the residual stress in MEMS films to be mapped at the wafer level by using microstructures released by surface micromachining. These dedicated MEMS test structures and the associated measurement techniques are used to extract localized information on the strain and Young’s modulus of the film under investigation. The residual stress is then determined by numerically coupling this data with a finite element analysis of the structure. This paper illustrates the measurement routine and demonstrates it with a case study using electrochemically deposited alloys of nickel and iron, particularly prone to develop high levels of residual stress. The results show that the technique enables wafer mapping of film non-uniformities and identifies wafer-to-wafer differences. A comparison between the results obtained from the mapping technique and conventional wafer bow measurements highlights the benefits of using a procedure tailored to films that are non-uniform, patterned and surface-micromachined, as opposed to simple standard stress extraction methods. The presented technique reveals detailed information that is generally unexplored when using conventional stress extraction methods such as wafer bow measurements. (paper)

  17. Fibroblast adhesion and activation onto micro-machined titanium surfaces.

    Science.gov (United States)

    Guillem-Marti, J; Delgado, L; Godoy-Gallardo, M; Pegueroles, M; Herrero, M; Gil, F J

    2013-07-01

    Surface modifications performed at the neck of dental implants, in the manner of micro-grooved surfaces, can reduce fibrous tissue encapsulation and prevent bacterial colonization, thereby improving fibrointegration and the formation of a biological seal. However, the applied procedures are technically complex and/or time consuming methods. The aim of this study was to analyse the fibroblast behaviour on modified titanium surfaces obtained, applying a simple and low-cost method. An array of titanium surfaces was obtained using a commercial computerized numerical control lathe, modifying the feed rate and the cutting depth. To elucidate the potential ability of the generated surfaces to activate connective tissue cells, a thorough gene (by real time - qPCR) and protein (by western blot or zymography) expression and cellular response characterization (cell morphology, cell adhesion and cell activation by secreting extracellular matrix (ECM) components and their enzyme regulators) was performed. Micro-grooved surfaces have statistically significant differences in the groove's width (approximately 10, 50 and 100 μm) depending on the applied advancing fixed speed. Field emission scanning electron microscopy images showed that fibroblasts oriented along the generated grooves, but they were only entirely accommodated on the wider grooves (≥50 μm). Micro-grooved surfaces exhibited an earlier cell attachment and activation, as seen by collagen Iα1 and fibronectin deposition and activation of ECM remodelling enzymes, compared with the other surfaces. However, fibroblasts could remain in an activated state on narrower surfaces (micro-grooved surfaces could improve implant integration at the gingival site with respect to polished surfaces. Micro-grooved surfaces enhance early fibroblast adhesion and activation, which could be critical for the formation of a biological seal and finally promote tissue integration. Surfaces with wider grooves (≥50 μm) seem to be more

  18. A novel hybrid surface micromachined segmented mirror for large aperture laser applications

    Science.gov (United States)

    Li, Jie; Chen, Haiqing; Yu, Hongbin

    2006-07-01

    A novel hybrid surface micromachined segmented mirror array is described. This device is capable of scaling to large apertures for correcting time-varying aberrations in laser applications. Each mirror is composed of bottom electrode, support part, and mirror plate, in which a T-shaped beam structure is used to support the mirror plate. It can provide mirror with vertical movement and rotation around two horizontal axes. The test results show that the maximum deflection along the vertical direction of the mirror plate is 2 microns, while the rotation angles around x and y axes are +-2.3 deg. and +-1.45 deg., respectively.

  19. PECVD silicon carbide surface micromachining technology and selected MEMS applications

    NARCIS (Netherlands)

    Rajaraman, V.; Pakula, L.S.; Yang, H.; French, P.J.; Sarro, P.M.

    2011-01-01

    Attractive material properties of plasma enhanced chemical vapour deposited (PECVD) silicon carbide (SiC) when combined with CMOS-compatible low thermal budget processing provides an ideal technology platform for developing various microelectromechanical systems (MEMS) devices and merging them with

  20. Dependence of capillary forces on relative humidity and the surface properties of femtosecond laser micromachined titanium.

    Science.gov (United States)

    Lehr, Jorge; Kietzig, Anne-Marie

    2015-06-15

    Capillary forces were measured with colloidal atomic force microscopy at different levels of relative humidity on femtosecond laser micromachined titanium surfaces. After laser machining at different intensity levels, the titanium surfaces show a nanoscale ripple topology or microscopic bumpy structures. Different machining environments were chosen to influence the surface chemistry in addition to topology: while machining in pure oxygen and water resulted in surfaces consisting of TiO2, a composite surface of TiO2 and TiN was obtained after machining in pure nitrogen. All samples were subsequently exposed to pure oxygen, carbon dioxide or water, and showed different levels of wettability and capillary force. We have introduced the concept of humidity sensitivity as the relative increase of the capillary force with respect to the measured force at 0% humidity. We report that samples with a nanoscale ripple topology machined in pure oxygen exhibit the lowest level of capillary force and the lowest sensitivity towards humidity in the environment. Surfaces with low sensitivity towards changes of the relative humidity are good candidates for technical applications, where capillary forces have to be controlled. This study contributes to the development of such surfaces, to a better understanding of how capillary bridges are formed on rough surfaces and ultimately to the exploration of the relationship between surface wettability and capillary forces. Copyright © 2015 Elsevier Inc. All rights reserved.

  1. Differential search algorithm-based parametric optimization of electrochemical micromachining processes

    Directory of Open Access Journals (Sweden)

    Debkalpa Goswami

    2014-01-01

    Full Text Available Electrochemical micromachining (EMM appears to be a very promising micromachining process for having higher machining rate, better precision and control, reliability, flexibility, environmental acceptability, and capability of machining a wide range of materials. It permits machining of chemically resistant materials, like titanium, copper alloys, super alloys and stainless steel to be used in biomedical, electronic, micro-electromechanical system and nano-electromechanical system applications. Therefore, the optimal use of an EMM process for achieving enhanced machining rate and improved profile accuracy demands selection of its various machining parameters. Various optimization tools, primarily Derringer’s desirability function approach have been employed by the past researchers for deriving the best parametric settings of EMM processes, which inherently lead to sub-optimal or near optimal solutions. In this paper, an attempt is made to apply an almost new optimization tool, i.e. differential search algorithm (DSA for parametric optimization of three EMM processes. A comparative study of optimization performance between DSA, genetic algorithm and desirability function approach proves the wide acceptability of DSA as a global optimization tool.

  2. The Development of Micromachined Gyroscope Structure and Circuitry Technology

    OpenAIRE

    Dunzhu Xia; Cheng Yu; Lun Kong

    2014-01-01

    This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs), piezoelectric vibrating gyroscopes (PVGs), surface acoustic wave (SAW) gyroscopes, bulk acoustic wave (BAW) gyroscopes, micromachined electrostati...

  3. Fabrication of Vacuum-Sealed Capacitive Micromachined Ultrasonic Transducer Arrays Using Glass Reflow Process

    Directory of Open Access Journals (Sweden)

    Nguyen Van Toan

    2016-04-01

    Full Text Available This paper presents a process for the fabrication of vacuum-sealed capacitive micromachined ultrasonic transducer (CMUT arrays using glass reflow and anodic bonding techniques. Silicon through-wafer interconnects have been investigated by the glass reflow process. Then, the patterned silicon-glass reflow wafer is anodically bonded to an SOI (silicon-on-insulator wafer for the fabrication of CMUT devices. The CMUT 5 × 5 array has been successfully fabricated. The resonant frequency of the CMUT array with a one-cell radius of 100 µm and sensing gap of 3.2 µm (distance between top and bottom electrodes is observed at 2.84 MHz. The Q factor is approximately 1300 at pressure of 0.01 Pa.

  4. Optimization of micropipette fabrication by laser micromachining for application in an ultrafine atmospheric pressure plasma jet using response surface methodology

    International Nuclear Information System (INIS)

    Wang, Tao; Liu, Jingquan; Yang, Bin; Chen, Xiang; Wang, Xiaolin; Yang, Chunsheng

    2016-01-01

    The optimization of the laser micromachining process for special tapered micropipettes was investigated using response surface methodology. Three process parameters for the CO 2 laser-based micropipette puller (P-2000, Sutter Instrument) were chosen as variables, namely heat, velocity and pull. The targeted length L TVS of the tapered variant section with a tip diameter of 10 μ m was taken as a response. The optimum process parameters with L TVS of 7.3 mm were determined by analyzing the response surface three-dimension surface plots. The central composite design was selected to optimize the process variables, and the experimental data were fitted into a reduced cubic polynomial model. The high R 2 value (99.66%) and low coefficient of variation (0.73%) indicated the statistical significance of the model and good precision for the experiment. The optimization result showed that the best parameters were with the heat, velocity and pull values of 850, 53 and 170, respectively. The result was verified by a CO 2 laser-based micropipette puller three times with length L TVS at 7.26 mm, 7.35 mm and 7.36 mm with the same optimized parameters. Then, the application to the ultrafine atmospheric pressure He/O 2 plasma jets was carried out and micro-hole etching of the parylene-C film was realized with length L TVS at 6.29 mm, 7.35 mm and 8.02 mm. The results showed that the micro-plasma jet with an L TVS of 7.35 mm had the minimum applied voltage of 12.7 kV and the minimum micro-etching diameter of 45 μ m with the deepest etching depth of 2.8 μ m. (paper)

  5. Surface-Micromachined Neural Sensors with Integrated Double Side Recordings on Dry-Etch Benzocyclobutene(BCB) Substrate.

    Science.gov (United States)

    Zhu, Haixin; He, Jiping; Kim, Bruce

    2005-01-01

    a neural sensor with novel structure and capable of double side recordings has been designed and fabricated using surface micromachining technique. Dry-etch Benzocyclobutene (BCB) was selected as the substrate and packaging material for its excellent electrical, mechanical and thermal properties. Positive photoresist (AZ4620) was used as the sacrificial layer during the formation of backside recording sites, and the lift-off process combined with BCB dry etch technique was developed to open the recording sites on the backside. The finished device has intracortical recording sites on both sides, and also epidural recording sites on the front side. The total channel number doubled compared to that of single side electrode structure. Three dry-etch BCB layers were applied to insulate the front side conduction traces from the backside trace layer, and package the entire devices. The developed process shows reliable and high fabrication yield, and results suggest that this newly developed neural sensor could improve the performance and efficiency of neural recording.

  6. Linkage design effect on the reliability of surface micromachined microengines driving a load

    Energy Technology Data Exchange (ETDEWEB)

    Tanner, D.M.; Peterson, K.A.; Irwin, L.W.; Tangyunyong, P.; Miller, W.M.; Eaton, W.P.; Smith, N.F.; Rodgers, M.S.

    1998-08-01

    The reliability of microengines is a function of the design of the mechanical linkage used to connect the electrostatic actuator to the drive. The authors have completed a series of reliability stress tests on surface micromachined microengines driving an inertial load. In these experiments, the authors used microengines that had pin mechanisms with guides connecting the drive arms to the electrostatic actuators. Comparing this data to previous results using flexure linkages revealed that the pin linkage design was less reliable. The devices were stressed to failure at eight frequencies, both above and below the measured resonance frequency of the microengine. Significant amounts of wear debris were observed both around the hub and pin joint of the drive gear. Additionally, wear tracks were observed in the area where the moving shuttle rubbed against the guides of the pin linkage. At each frequency, they analyzed the statistical data yielding a lifetime (t{sub 50}) for median cycles to failure and {sigma}, the shape parameter of the distribution. A model was developed to describe the failure data based on fundamental wear mechanisms and forces exhibited in mechanical resonant systems. The comparison to the model will be discussed.

  7. Development of capacitive Micromachined Ultrasonic Transducer (II) - Analysis of Microfabrication Process

    International Nuclear Information System (INIS)

    Kim, Ki Bok; Ahn, Bong Young; Park, Hae Won; Kim, Young Joo; Kim, Kuk Jin; Lee, Seung Seok

    2004-01-01

    The main goal of this study was to develop a micro-fabrication process for the capacitive micromachined ultrasonic transducer (cMUT). In order to achieve this goal, the former research results of the micro-electro-mechanical system (MEMS) process for the cMUT were analyzed. The membrane deposition, sacrificial layer deposition and etching were found to be a main process of fabricating the cMUT. The optimal conditions for those microfabrication were determined by the experiment. The thickness, uniformity, and residual stress of the Si 3 N 3 deposition which forms the membrane of the cMUT were characterized after growing the Si 3 N 3 on Si-wafer under various process conditions. As a sacrificial layer, the growth rate of the SiO 2 deposition was analyzed under several process conditions. The optimal etching conditions of the sacrificial layer were analyzed. The microfabrication process developed in this study will be used to fabricate the cMUT

  8. Development of capacitive Micromachined Ultrasonic Transducer (II) - Analysis of Microfabrication Process

    Energy Technology Data Exchange (ETDEWEB)

    Kim, Ki Bok; Ahn, Bong Young; Park, Hae Won; Kim, Young Joo; Kim, Kuk Jin; Lee, Seung Seok [Korea Research Institute of Standards and Science, Daejeon (Korea, Republic of)

    2004-12-15

    The main goal of this study was to develop a micro-fabrication process for the capacitive micromachined ultrasonic transducer (cMUT). In order to achieve this goal, the former research results of the micro-electro-mechanical system (MEMS) process for the cMUT were analyzed. The membrane deposition, sacrificial layer deposition and etching were found to be a main process of fabricating the cMUT. The optimal conditions for those microfabrication were determined by the experiment. The thickness, uniformity, and residual stress of the Si{sub 3}N{sub 3} deposition which forms the membrane of the cMUT were characterized after growing the Si{sub 3}N{sub 3} on Si-wafer under various process conditions. As a sacrificial layer, the growth rate of the SiO{sub 2} deposition was analyzed under several process conditions. The optimal etching conditions of the sacrificial layer were analyzed. The microfabrication process developed in this study will be used to fabricate the cMUT

  9. 31-mode piezoelectric micromachined ultrasonic transducer with PZT thick film by granule spraying in vacuum process

    Science.gov (United States)

    Jung, Joontaek; Annapureddy, Venkateswarlu; Hwang, Geon-Tae; Song, Youngsup; Lee, Wonjun; Kang, Woojin; Ryu, Jungho; Choi, Hongsoo

    2017-05-01

    A piezoelectric micromachined ultrasonic transducer (pMUT) is an ideal device for portable medical diagnosis systems, intravascular ultrasound systems, and ultrasonic cameras because of its favorable characteristics including small size, acoustic impedance matching with the body, low power consumption, and simple integration with the systems. Despite these advantages, practical applications are limited because of insufficient acoustic pressure of the pMUT caused by the thin active piezoelectric layer. Here, we report the fabrication of a thick piezoelectric Pb(Zr,Ti)O3 (PZT) film-based pMUT device having high deflection at low driving voltage using the granule spraying in vacuum (GSV) process. Pre-patterned high-density thick (exceeding 8 μm) PZT films were grown on 6-inch-diameter Si/SiO2/Ti/Pt silicon-on-insulator wafers at room temperature at a high deposition rate of ˜5 μm min-1. The fabrication process using the proposed GSV process was simple and fast, and the deflection of the pMUT exhibited a high value of 0.8 μm.

  10. Micro-machining.

    Science.gov (United States)

    Brinksmeier, Ekkard; Preuss, Werner

    2012-08-28

    Manipulating bulk material at the atomic level is considered to be the domain of physics, chemistry and nanotechnology. However, precision engineering, especially micro-machining, has become a powerful tool for controlling the surface properties and sub-surface integrity of the optical, electronic and mechanical functional parts in a regime where continuum mechanics is left behind and the quantum nature of matter comes into play. The surprising subtlety of micro-machining results from the extraordinary precision of tools, machines and controls expanding into the nanometre range-a hundred times more precise than the wavelength of light. In this paper, we will outline the development of precision engineering, highlight modern achievements of ultra-precision machining and discuss the necessity of a deeper physical understanding of micro-machining.

  11. Micromachined silicon seismic accelerometer development

    Energy Technology Data Exchange (ETDEWEB)

    Barron, C.C.; Fleming, J.G.; Montague, S. [and others

    1996-08-01

    Batch-fabricated silicon seismic transducers could revolutionize the discipline of seismic monitoring by providing inexpensive, easily deployable sensor arrays. Our ultimate goal is to fabricate seismic sensors with sensitivity and noise performance comparable to short-period seismometers in common use. We expect several phases of development will be required to accomplish that level of performance. Traditional silicon micromachining techniques are not ideally suited to the simultaneous fabrication of a large proof mass and soft suspension, such as one needs to achieve the extreme sensitivities required for seismic measurements. We have therefore developed a novel {open_quotes}mold{close_quotes} micromachining technology that promises to make larger proof masses (in the 1-10 mg range) possible. We have successfully integrated this micromolding capability with our surface-micromachining process, which enables the formation of soft suspension springs. Our calculations indicate that devices made in this new integrated technology will resolve down to at least sub-{mu}G signals, and may even approach the 10{sup -10} G/{radical}Hz acceleration levels found in the low-earth-noise model.

  12. Acceleration of dormant storage effects to address the reliability of silicon surface micromachined Micro-Electro-Mechanical Systems (MEMS).

    Energy Technology Data Exchange (ETDEWEB)

    Cox, James V.; Candelaria, Sam A.; Dugger, Michael Thomas; Duesterhaus, Michelle Ann; Tanner, Danelle Mary; Timpe, Shannon J.; Ohlhausen, James Anthony; Skousen, Troy J.; Jenkins, Mark W.; Jokiel, Bernhard, Jr.; Walraven, Jeremy Allen; Parson, Ted Blair

    2006-06-01

    Qualification of microsystems for weapon applications is critically dependent on our ability to build confidence in their performance, by predicting the evolution of their behavior over time in the stockpile. The objective of this work was to accelerate aging mechanisms operative in surface micromachined silicon microelectromechanical systems (MEMS) with contacting surfaces that are stored for many years prior to use, to determine the effects of aging on reliability, and relate those effects to changes in the behavior of interfaces. Hence the main focus was on 'dormant' storage effects on the reliability of devices having mechanical contacts, the first time they must move. A large number ({approx}1000) of modules containing prototype devices and diagnostic structures were packaged using the best available processes for simple electromechanical devices. The packaging processes evolved during the project to better protect surfaces from exposure to contaminants and water vapor. Packages were subjected to accelerated aging and stress tests to explore dormancy and operational environment effects on reliability and performance. Functional tests and quantitative measurements of adhesion and friction demonstrated that the main failure mechanism during dormant storage is change in adhesion and friction, precipitated by loss of the fluorinated monolayer applied after fabrication. The data indicate that damage to the monolayer can occur at water vapor concentrations as low as 500 ppm inside the package. The most common type of failure was attributed to surfaces that were in direct contact during aging. The application of quantitative methods for monolayer lubricant analysis showed that even though the coverage of vapor-deposited monolayers is generally very uniform, even on hidden surfaces, locations of intimate contact can be significantly depleted in initial concentration of lubricating molecules. These areas represent defects in the film prone to adsorption of

  13. A three-mask process for fabricating vacuum-sealed capacitive micromachined ultrasonic transducers using anodic bonding.

    Science.gov (United States)

    Yamaner, F Yalçın; Zhang, Xiao; Oralkan, Ömer

    2015-05-01

    This paper introduces a simplified fabrication method for vacuum-sealed capacitive micromachined ultrasonic transducer (CMUT) arrays using anodic bonding. Anodic bonding provides the established advantages of wafer-bondingbased CMUT fabrication processes, including process simplicity, control over plate thickness and properties, high fill factor, and ability to implement large vibrating cells. In addition to these, compared with fusion bonding, anodic bonding can be performed at lower processing temperatures, i.e., 350°C as opposed to 1100°C; surface roughness requirement for anodic bonding is more than 10 times more relaxed, i.e., 5-nm rootmean- square (RMS) roughness as opposed to 0.5 nm for fusion bonding; anodic bonding can be performed on smaller contact area and hence improves the fill factor for CMUTs. Although anodic bonding has been previously used for CMUT fabrication, a CMUT with a vacuum cavity could not have been achieved, mainly because gas is trapped inside the cavities during anodic bonding. In the approach we present in this paper, the vacuum cavity is achieved by opening a channel in the plate structure to evacuate the trapped gas and subsequently sealing this channel by conformal silicon nitride deposition in the vacuum environment. The plate structure of the fabricated CMUT consists of the single-crystal silicon device layer of a silicon-on-insulator wafer and a thin silicon nitride insulation layer. The presented fabrication approach employs only three photolithographic steps and combines the advantages of anodic bonding with the advantages of a patterned metal bottom electrode on an insulating substrate, specifically low parasitic series resistance and low parasitic shunt capacitance. In this paper, the developed fabrication scheme is described in detail, including process recipes. The fabricated transducers are characterized using electrical input impedance measurements in air and hydrophone measurements in immersion. A representative

  14. Safety and security monitoring of dams using nano-micromachined-based surface acoustic wave (SAW) sensors

    Science.gov (United States)

    Ross, Wayne, Jr.; Saafi, Mohamed; Romine, Peter; Xiao, Zhigang; Pett, Dave

    2006-03-01

    Concerns about the safety of concrete dams have increased during recent years, partly because the population at risk in locations downstream of major dams continues to expand and also because these old dams are experiencing long-term damage and the seismic design concepts used to build them were inadequate. Reliable techniques for continuous monitoring of certain key parameters affecting the dams' integrity are currently nonexistent and this is because of the lack of sensing technology capable to function in a hostile environment such as low temperatures and high moisture level. This paper presents new low cost, passive and wireless micro-machined SAW-based sensors to monitor the safety and security of dams. These SAW sensors are composed of MEMS transducers, Nano-polymer actuators and an antenna, and are deposited on a thin film substrate. The sensors are passive, do not require power on-board and can be interrogated wireless using a radar. When embedded into concrete dams, the devices will be able to detect and locate internal cracks and measure certain key parameters affecting the durability of dams such as temperature, moisture, pH, chloride and carbon dioxide.

  15. A row-column addressed micromachined ultrasonic transducer array for surface scanning applications.

    Science.gov (United States)

    Wong, Lawrence L P; Chen, Albert I H; Li, Zhenhao; Logan, Andrew S; Yeow, John T W

    2014-12-01

    Row-column addressed arrays for ultrasonic non-destructive testing (NDT) applications are analyzed and demonstrated in this paper. Simulation and experimental results of a row-column addressed 32 by 32 capacitive micromachined ultrasonic transducer (CMUT) array are presented. The CMUT array, which was designed for medical imaging applications, has a center frequency of 5.3MHz. The CMUT array was used to perform C-scans on test objects with holes that have diameters of 1.0mm and 0.5mm. The array transducer has an aperture size of 4.8mm by 4.8mm, and it was used to scan an area of 4.0mm by 4.0mm. Compared to an N by N fully addressed 2-D array, a row-column addressed array of the same number of elements requires fewer (N instead of N(2)) pairs of interconnection and supporting electronic components such as pulsers and amplifiers. Even though the resulting field of view is limit by the aperture size, row-column addressed arrays and the row-column addressing scheme can be an alternative option of 2-D arrays for NDT applications. Copyright © 2014 Elsevier B.V. All rights reserved.

  16. Laser Micromachining of Glass, Silicon, and Ceramics

    Directory of Open Access Journals (Sweden)

    L. Rihakova

    2015-01-01

    Full Text Available A brief review is focused on laser micromachining of materials. Micromachining of materials is highly widespread method used in many industries, including semiconductors, electronic, medical, and automotive industries, communication, and aerospace. This method is a promising tool for material processing with micron and submicron resolution. In this paper micromachining of glass, silicon, and ceramics is considered. Interaction of these materials with laser radiation and recent research held on laser material treatment is provided.

  17. Fabrication of Mutilayered Microgear Using a Vertically Modularized and Sectioned Micromold System by X-ray Micromachining Process

    Science.gov (United States)

    Kim, Jong Hyun; Chang, Suk Sang; Lim, Geunbae; Lee, Bong-Kee

    2011-06-01

    In the present study, a vertically modularized and sectioned micromold system (v-MSMS) is proposed and developed by synchrotron X-ray micromachining process. The developed v-MSMS is a novel concept of constructing a micromold system by stacking several micromold modules. As one representative application of the present v-MSMS, micromold system with several kinds of spur gear patterns was fabricated using deep X-ray lithography and a subsequent nickel electroforming process. Then, the usefulness of v-MSMS was demonstrated by casting the microgear with multiple layers. The proposed technique can be a useful tool for the mass replication of multilayered mechanical components, various micro parts, complicated microstructures, and so on.

  18. Surface micromachined MEMS deformable mirror based on hexagonal parallel-plate electrostatic actuator

    Science.gov (United States)

    Ma, Wenying; Ma, Changwei; Wang, Weimin

    2018-03-01

    Deformable mirrors (DM) based on microelectromechanical system (MEMS) technology are being applied in adaptive optics (AO) system for astronomical telescopes and human eyes more and more. In this paper a MEMS DM with hexagonal actuator is proposed and designed. The relationship between structural design and performance parameters, mainly actuator coupling, is analyzed carefully and calculated. The optimum value of actuator coupling is obtained. A 7-element DM prototype is fabricated using a commercial available standard three-layer polysilicon surface multi-user-MEMS-processes (PolyMUMPs). Some key performances, including surface figure and voltage-displacement curve, are measured through a 3D white light profiler. The measured performances are very consistent with the theoretical values. The proposed DM will benefit the miniaturization of AO systems and lower their cost.

  19. Micromachined silicon seismic transducers

    Energy Technology Data Exchange (ETDEWEB)

    Barron, C.C.; Fleming, J.G.; Sniegowski, J.J.; Armour, D.L.; Fleming, R.P.

    1995-08-01

    Batch-fabricated silicon seismic transducers could revolutionize the discipline of CTBT monitoring by providing inexpensive, easily depolyable sensor arrays. Although our goal is to fabricate seismic sensors that provide the same performance level as the current state-of-the-art ``macro`` systems, if necessary one could deploy a larger number of these small sensors at closer proximity to the location being monitored in order to compensate for lower performance. We have chosen a modified pendulum design and are manufacturing prototypes in two different silicon micromachining fabrication technologies. The first set of prototypes, fabricated in our advanced surface- micromachining technology, are currently being packaged for testing in servo circuits -- we anticipate that these devices, which have masses in the 1--10 {mu}g range, will resolve sub-mG signals. Concurrently, we are developing a novel ``mold`` micromachining technology that promises to make proof masses in the 1--10 mg range possible -- our calculations indicate that devices made in this new technology will resolve down to at least sub-{mu}G signals, and may even approach to 10{sup {minus}10} G/{radical}Hz acceleration levels found in the low-earth-noise model.

  20. Surface-micromachined magnetic undulator with period length between 10μm and 1 mm for advanced light sources

    Science.gov (United States)

    Harrison, Jere; Joshi, Abhijeet; Lake, Jonathan; Candler, Rob; Musumeci, Pietro

    2012-07-01

    A technological gap exists between the μm-scale wiggling periods achieved using electromagnetic waves of high intensity laser pulses and the mm scale of permanent-magnet and superconducting undulators. In the sub-mm range, surface-micromachined soft-magnetic micro-electro-mechanical system inductors with integrated solenoidal coils have already experimentally demonstrated 100 to 500 mT field amplitude across air gaps as large as 15μm. Simulations indicate that magnetic fields as large as 1.5 T across 50μm inductor gaps are feasible. A simple rearranging of the yoke and pole geometry allows for fabrication of 10+ cm long undulator structures with period lengths between 12.5μm and 1 mm. Such undulators find application both in high average power spontaneous emission sources and, if used in combination with ultrahigh-brightness electron beams, could lead to the realization of low energy compact free-electron lasers. Challenges include electron energy broadening due to wakefields and Joule heating in the electromagnet.

  1. Predictive modeling, simulation, and optimization of laser processing techniques: UV nanosecond-pulsed laser micromachining of polymers and selective laser melting of powder metals

    Science.gov (United States)

    Criales Escobar, Luis Ernesto

    One of the most frequently evolving areas of research is the utilization of lasers for micro-manufacturing and additive manufacturing purposes. The use of laser beam as a tool for manufacturing arises from the need for flexible and rapid manufacturing at a low-to-mid cost. Laser micro-machining provides an advantage over mechanical micro-machining due to the faster production times of large batch sizes and the high costs associated with specific tools. Laser based additive manufacturing enables processing of powder metals for direct and rapid fabrication of products. Therefore, laser processing can be viewed as a fast, flexible, and cost-effective approach compared to traditional manufacturing processes. Two types of laser processing techniques are studied: laser ablation of polymers for micro-channel fabrication and selective laser melting of metal powders. Initially, a feasibility study for laser-based micro-channel fabrication of poly(dimethylsiloxane) (PDMS) via experimentation is presented. In particular, the effectiveness of utilizing a nanosecond-pulsed laser as the energy source for laser ablation is studied. The results are analyzed statistically and a relationship between process parameters and micro-channel dimensions is established. Additionally, a process model is introduced for predicting channel depth. Model outputs are compared and analyzed to experimental results. The second part of this research focuses on a physics-based FEM approach for predicting the temperature profile and melt pool geometry in selective laser melting (SLM) of metal powders. Temperature profiles are calculated for a moving laser heat source to understand the temperature rise due to heating during SLM. Based on the predicted temperature distributions, melt pool geometry, i.e. the locations at which melting of the powder material occurs, is determined. Simulation results are compared against data obtained from experimental Inconel 625 test coupons fabricated at the National

  2. The integration of surface micromachined devices with optoelectronics: Technology and applications

    Energy Technology Data Exchange (ETDEWEB)

    Warren, M.E.; Blum, O.; Sullivan, C.T.; Shul, R.J.; Rodgers, M.S.; Sniegowski, J.J.

    1998-04-01

    Sandia National Laboratories has a substantial effort in development of microelectromechanical system (MEMS) technologies. This miniaturization capability can lead to low-cost, small, high-performance systems-on-a-chip, and have many applications ranging from advanced military systems to large-volume commercial markets like automobiles, rf or land-based communications networks and equipment, or commercial electronics. One of the key challenges in realization of the microsystem is integration of several technologies including digital electronics; analog and rf electronics, optoelectronics, sensors and actuators, and advanced packaging technologies. In this work they describe efforts in integrating MEMS and optoelectronic or photonic functions and the fabrication constraints on both system components. the MEMS technology used in this work are silicon surface-machined systems fabricated using the SUMMiT (Sandia Ultraplanar Multilevel MEMS Technology) process developed at Sandia. This process includes chemical-mechanical polishing as an intermediate planarization step to allow the use of 4 or 5 levels of polysilicon.

  3. The development of micromachined gyroscope structure and circuitry technology.

    Science.gov (United States)

    Xia, Dunzhu; Yu, Cheng; Kong, Lun

    2014-01-14

    This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs), piezoelectric vibrating gyroscopes (PVGs), surface acoustic wave (SAW) gyroscopes, bulk acoustic wave (BAW) gyroscopes, micromachined electrostatically suspended gyroscopes (MESGs), magnetically suspended gyroscopes (MSGs), micro fiber optic gyroscopes (MFOGs), micro fluid gyroscopes (MFGs), micro atom gyroscopes (MAGs), and special micromachined gyroscopes. Next, the control electronics of micromachined gyroscopes are analyzed. The control circuits are categorized into typical circuitry and special circuitry technologies. The typical circuitry technologies include typical analog circuitry and digital circuitry, while the special circuitry consists of sigma delta, mode matching, temperature/quadrature compensation and novel special technologies. Finally, the characteristics of various typical gyroscopes and their development tendency are discussed and investigated in detail.

  4. The Development of Micromachined Gyroscope Structure and Circuitry Technology

    Directory of Open Access Journals (Sweden)

    Dunzhu Xia

    2014-01-01

    Full Text Available This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs, piezoelectric vibrating gyroscopes (PVGs, surface acoustic wave (SAW gyroscopes, bulk acoustic wave (BAW gyroscopes, micromachined electrostatically suspended gyroscopes (MESGs, magnetically suspended gyroscopes (MSGs, micro fiber optic gyroscopes (MFOGs, micro fluid gyroscopes (MFGs, micro atom gyroscopes (MAGs, and special micromachined gyroscopes. Next, the control electronics of micromachined gyroscopes are analyzed. The control circuits are categorized into typical circuitry and special circuitry technologies. The typical circuitry technologies include typical analog circuitry and digital circuitry, while the special circuitry consists of sigma delta, mode matching, temperature/quadrature compensation and novel special technologies. Finally, the characteristics of various typical gyroscopes and their development tendency are discussed and investigated in detail.

  5. The micromachined logo of Atomki

    International Nuclear Information System (INIS)

    Rajta, I.; Szilasi, S.Z.

    2006-01-01

    Complete text of publication follows. Proton Beam Micromachining, also known as P-beam Writing, is a direct write 3- dimensional lithographic technique. Conventional resist types are PMMA (polymethylmethacrylate), and SU-8 (of MicroChem Corp.); they are positive and negative resists, respectively. In this work we used SU-8, the most common negative resist material. SU-8 was spun on a flat surface, typically Silicon or glass. A direct write proton beam was scanned over an arbitary structure (the Atomki logo can be replaced by any other structure), which produces chain scissioning in the polymer. Post exposure bake (PEB) is usually needed in case of conventional optical lithography, but using protons this bake is done in situ as the ions heat up the sample in vacuum. Subsequently chemical etching takes place, the solvent is available at MicroChem Corp. The schematic diagram of the above described micromachining process is shown on Fig. 1. The irradiation requires a scanning proton microbeam system equipped with suitable beam scanning and blanking facilities. This is available in the Institute, our setup has been upgraded from doublet to triplet focusing system (Oxford Microbeams Ltd.). For scanning we use a DIO card (PCI-6731 of National Instruments), and the IonScan software [1]. Sample preparation was carried out at our 'semi clean' room. This is also where chemical development of the samples and the optical microscopy have been done too. A Zeiss Axio Imager microscope is available (equipped with 5 objective lenses, 4 different contrast methods, transmitted or reflected light illumination). Fig. 2. shows a typical example of the Atomki logo. This is a bright field image, a number of different nice and colourful images can be produced with the other contrast techniques (for more images see the Institute website: http://www.atomki.hu/ ). (author)

  6. Trends in laser micromachining

    Science.gov (United States)

    Gaebler, Frank; van Nunen, Joris; Held, Andrew

    2016-03-01

    Laser Micromachining is well established in industry. Depending on the application lasers with pulse length from μseconds to femtoseconds and wavelengths from 1064nm and its harmonics up to 5μm or 10.6μm are used. Ultrafast laser machining using pulses with pico or femtosecond duration pulses is gaining traction, as it offers very precise processing of materials with low thermal impact. Large-scale industrial ultrafast laser applications show that the market can be divided into various sub segments. One set of applications demand low power around 10W, compact footprint and are extremely sensitive to the laser price whilst still demanding 10ps or shorter laser pulses. A second set of applications are very power hungry and only become economically feasible for large scale deployments at power levels in the 100+W class. There is also a growing demand for applications requiring fs-laser pulses. In our presentation we would like to describe these sub segments by using selected applications from the automotive and electronics industry e.g. drilling of gas/diesel injection nozzles, dicing of LED substrates. We close the presentation with an outlook to micromachining applications e.g. glass cutting and foil processing with unique new CO lasers emitting 5μm laser wavelength.

  7. Micromachined Integrated Transducers for Ultrasound Imaging

    DEFF Research Database (Denmark)

    la Cour, Mette Funding

    The purpose of this project is to develop capacitive micromachined ultrasonic transducers (CMUTs) for medical imaging. Medical ultrasound transducers used today are fabricated using piezoelectric materials and bulk processing. To fabricate transducers capable of delivering a higher imaging...

  8. Surface micromachined scanning mirrors

    DEFF Research Database (Denmark)

    Mattsson, Kent Erik

    1992-01-01

    Both aluminum cantilever and torsional scanning mirrors have been fabricated and their static and dynamic properties are studied experimentally and theoretically. The experiments showed resonance frequencies in the range of 163 k-Hz - 632 kHz for cantilever beams with Q values between 5 and 11....... Torsional mirrors showed resonance frequencies in the range of 410 kHz - 667 kHz with Q values of 10 - 17. All measurements performed at atmospheric pressure. Both types of mechanical structures were deflected electrostatically at large angles (± 5°) more than 1011 times without breaking and without any...

  9. Micromachined Precision Inertial Instruments

    National Research Council Canada - National Science Library

    Najafi, Khalil

    2003-01-01

    This program focuses on developing inertial-grade micromachined accelerometers and gyroscopes and their associated electronics and packaging for use in a variety of military and commercial applications...

  10. Micromachined electrode array

    Science.gov (United States)

    Okandan, Murat; Wessendorf, Kurt O.

    2007-12-11

    An electrode array is disclosed which has applications for neural stimulation and sensing. The electrode array, in certain embodiments, can include a plurality of electrodes each of which is flexibly attached to a common substrate using a plurality of springs to allow the electrodes to move independently. In other embodiments of the electrode array, the electrodes can be fixed to the substrate. The electrode array can be formed from a combination of bulk and surface micromachining, and can include electrode tips having an electroplated metal (e.g. platinum, iridium, gold or titanium) or a metal oxide (e.g. iridium oxide) for biocompatibility. The electrode array can be used to form a part of a neural prosthesis, and is particularly well adapted for use in an implantable retinal prosthesis.

  11. CMOS Compatibility of a Micromachining Process Developed for Semiconductor Neural Probe

    National Research Council Canada - National Science Library

    An, S

    2001-01-01

    .... Test transistor patterns generated using standard CMOS fabrication line were exposed to a post-CMOS probe making process including dielectric deposition, gold metalization and the dry etching step...

  12. Silicon-micromachined microchannel plates

    Energy Technology Data Exchange (ETDEWEB)

    Beetz, Charles P. E-mail: NanoSystem@aol.com; Boerstler, Robert; Steinbeck, John; Lemieux, Bryan; Winn, David R. E-mail: winn@fair1.fairfield.edu

    2000-03-11

    Microchannel plates (MCP) fabricated from standard silicon wafer substrates using a novel silicon micromachining process, together with standard silicon photolithographic process steps, are described. The resulting SiMCP microchannels have dimensions of {approx}0.5 to {approx}25 {mu}m, with aspect ratios up to 300, and have the dimensional precision and absence of interstitial defects characteristic of photolithographic processing, compatible with positional matching to silicon electronics readouts. The open channel areal fraction and detection efficiency may exceed 90% on plates up to 300 mm in diameter. The resulting silicon substrates can be converted entirely to amorphous quartz (qMCP). The strip resistance and secondary emission are developed by controlled depositions of thin films, at temperatures up to 1200 deg. C, also compatible with high-temperature brazing, and can be essentially hydrogen, water and radionuclide-free. Novel secondary emitters and cesiated photocathodes can be high-temperature deposited or nucleated in the channels or the first strike surface. Results on resistivity, secondary emission and gain are presented.

  13. Silicon-micromachined microchannel plates

    Science.gov (United States)

    Beetz, Charles P.; Boerstler, Robert; Steinbeck, John; Lemieux, Bryan; Winn, David R.

    2000-03-01

    Microchannel plates (MCP) fabricated from standard silicon wafer substrates using a novel silicon micromachining process, together with standard silicon photolithographic process steps, are described. The resulting SiMCP microchannels have dimensions of ˜0.5 to ˜25 μm, with aspect ratios up to 300, and have the dimensional precision and absence of interstitial defects characteristic of photolithographic processing, compatible with positional matching to silicon electronics readouts. The open channel areal fraction and detection efficiency may exceed 90% on plates up to 300 mm in diameter. The resulting silicon substrates can be converted entirely to amorphous quartz (qMCP). The strip resistance and secondary emission are developed by controlled depositions of thin films, at temperatures up to 1200°C, also compatible with high-temperture brazing, and can be essentially hydrogen, water and radionuclide-free. Novel secondary emitters and cesiated photocathodes can be high-temperature deposited or nucleated in the channels or the first strike surface. Results on resistivity, secondary emission and gain are presented.

  14. Silicon-micromachined microchannel plates

    International Nuclear Information System (INIS)

    Beetz, Charles P.; Boerstler, Robert; Steinbeck, John; Lemieux, Bryan; Winn, David R.

    2000-01-01

    Microchannel plates (MCP) fabricated from standard silicon wafer substrates using a novel silicon micromachining process, together with standard silicon photolithographic process steps, are described. The resulting SiMCP microchannels have dimensions of ∼0.5 to ∼25 μm, with aspect ratios up to 300, and have the dimensional precision and absence of interstitial defects characteristic of photolithographic processing, compatible with positional matching to silicon electronics readouts. The open channel areal fraction and detection efficiency may exceed 90% on plates up to 300 mm in diameter. The resulting silicon substrates can be converted entirely to amorphous quartz (qMCP). The strip resistance and secondary emission are developed by controlled depositions of thin films, at temperatures up to 1200 deg. C, also compatible with high-temperature brazing, and can be essentially hydrogen, water and radionuclide-free. Novel secondary emitters and cesiated photocathodes can be high-temperature deposited or nucleated in the channels or the first strike surface. Results on resistivity, secondary emission and gain are presented

  15. High Speed Pump-Probe Apparatus for Observation of Transitional Effects in Ultrafast Laser Micromachining Processes

    Directory of Open Access Journals (Sweden)

    Ilya Alexeev

    2015-12-01

    Full Text Available A pump-probe experimental approach has been shown to be a very efficient tool for the observation and analysis of various laser matter interaction effects. In those setups, synchronized laser pulses are used to create an event (pump and to simultaneously observe it (probe. In general, the physical effects that can be investigated with such an apparatus are restricted by the temporal resolution of the probe pulse and the observation window. The latter can be greatly extended by adjusting the pump-probe time delay under the assumption that the interaction process remains fairly reproducible. Unfortunately, this assumption becomes invalid in the case of high-repetition-rate ultrafast laser material processing, where the irradiation history strongly affects the ongoing interaction process. In this contribution, the authors present an extension of the pump-probe setup that allows to investigate transitional and dynamic effects present during ultrafast laser machining performed at high pulse repetition frequencies.

  16. Fabrication of a novel quartz micromachined gyroscope

    Directory of Open Access Journals (Sweden)

    Liqiang Xie

    2015-04-01

    Full Text Available A novel quartz micromachined gyroscope is proposed in this paper. The novel gyroscope is realized by quartz anisotropic wet etching and 3-dimensional electrodes deposition. In the quartz wet etching process, the quality of Cr/Au mask films affecting the process are studied by experiment. An excellent mask film with 100 Å Cr and 2000 Å Au is achieved by optimization of experimental parameters. Crystal facets after etching seriously affect the following sidewall electrodes deposition process and the structure’s mechanical behaviours. Removal of crystal facets is successfully implemented by increasing etching time based on etching rate ratios between facets and crystal planes. In the electrodes deposition process, an aperture mask evaporation method is employed to prepare electrodes on 3-dimensional surfaces of the gyroscope structure. The alignments among the aperture masks are realized by the ABM™ Mask Aligner System. Based on the processes described above, a z–axis quartz gyroscope is fabricated successfully.

  17. Micromachined droplet ejector arrays

    Science.gov (United States)

    Perçin, Gökhan; Yaralioglu, Göksenin G.; Khuri-Yakub, Butrus T.

    2002-12-01

    In this article we present a micromachined flextensional droplet ejector array used to eject liquids. By placing a fluid behind one face of a vibrating circular plate that has an orifice at its center, we achieve continuous ejection of the fluid. We present results of ejection of water and isopropanol. The ejector is harmless to sensitive fluids and can be used to eject fuels, organic polymers, photoresists, low-k dielectrics, adhesives, and chemical and biological samples. Micromachined two-dimensional array flextensional droplet ejectors were realized using planar silicon micromachining techniques. Typical resonant frequency of the micromachined device ranges from 400 kHz to 4.5 MHz. The ejections of water through a 4 μm diameter orifice at 3.45 MHz and a 10 μm diameter orifice at 2.15 MHz were demonstrated by using the developed micromachined two-dimensional array ejectors.

  18. Dry followed by wet backside etching processes for micromachined endfire antennae

    Science.gov (United States)

    Saadaoui, M.; Pons, P.; Plana, R.; Bary, L.; Dubreuil, P.; Bourrier, D.; Vasilache, D.; Neculoiu, D.; Müller, A.

    2005-07-01

    This paper presents a novel technological process based on dry followed by wet backside silicon etching for the manufacturing of 'quasi-three edge' membranes-supported millimeter wave circuits. The process is based on a backside deep reactive ion etching used to remove the first 350 µm of silicon, followed by wet etching in KOH solution, to eliminate the remaining 50 µm of silicon and create quasi-free edge membranes, according to the undercut mechanism. In order to validate the technology, a Yagi-Uda antenna for 45 GHz was designed using the Zeland IE3D software package, and fabricated. The demonstrator was characterized in terms of return loss and isotropic gain using 'on wafer' measurements. The agreement between the modeling and the measurements is very good, and validates the new technological approach, which assures free-space propagation conditions for endfire membrane-supported antennae structures.

  19. A CMOS micromachined capacitive tactile sensor with integrated readout circuits and compensation of process variations.

    Science.gov (United States)

    Tsai, Tsung-Heng; Tsai, Hao-Cheng; Wu, Tien-Keng

    2014-10-01

    This paper presents a capacitive tactile sensor fabricated in a standard CMOS process. Both of the sensor and readout circuits are integrated on a single chip by a TSMC 0.35 μm CMOS MEMS technology. In order to improve the sensitivity, a T-shaped protrusion is proposed and implemented. This sensor comprises the metal layer and the dielectric layer without extra thin film deposition, and can be completed with few post-processing steps. By a nano-indenter, the measured spring constant of the T-shaped structure is 2.19 kNewton/m. Fully differential correlated double sampling capacitor-to-voltage converter (CDS-CVC) and reference capacitor correction are utilized to compensate process variations and improve the accuracy of the readout circuits. The measured displacement-to-voltage transductance is 7.15 mV/nm, and the sensitivity is 3.26 mV/μNewton. The overall power dissipation is 132.8 μW.

  20. Micromachined patch-clamp apparatus

    Science.gov (United States)

    Okandan, Murat

    2012-12-04

    A micromachined patch-clamp apparatus is disclosed for holding one or more cells and providing electrical, chemical, or mechanical stimulation to the cells during analysis with the patch-clamp technique for studying ion channels in cell membranes. The apparatus formed on a silicon substrate utilizes a lower chamber formed from silicon nitride using surface micromachining and an upper chamber formed from a molded polymer material. An opening in a common wall between the chambers is used to trap and hold a cell for analysis using the patch-clamp technique with sensing electrodes on each side of the cell. Some embodiments of the present invention utilize one or more electrostatic actuators formed on the substrate to provide mechanical stimulation to the cell being analyzed, or to provide information about mechanical movement of the cell in response to electrical or chemical stimulation.

  1. Omega-X micromachining system

    International Nuclear Information System (INIS)

    Miller, D.M.

    1978-01-01

    A micromachining tool system with X- and omega-axes is used to machine spherical, aspherical, and irregular surfaces with a maximum contour error of 100 nonometers (nm) and surface waviness of no more than 0.8 nm RMS. The omega axis, named for the angular measurement of the rotation of an eccentric mechanism supporting one end of a tool bar, enables the pulse increments of the tool toward the workpiece to be as little as 0 to 4.4 nm. A dedicated computer coordinates motion in the two axes to produce the workpiece contour. Inertia is reduced by reducing the mass pulsed toward the workpiece to about one-fifth of its former value. The tool system includes calibration instruments to calibrate the micromachining tool system. Backlash is reduced and flexing decreased by using a rotary table and servomotor to pulse the tool in the omega-axis instead of a ball screw mechanism. A thermally-stabilized spindle roates the workpiece and is driven by a motor not mounted on the micromachining tool base through a torque-smoothing pulley and vibrationless rotary coupling. Abbe offset errors are almost eliminated by tool setting and calibration at spindle center height. Tool contour and workpiece contour are gaged on the machine; this enables the source of machining errors to be determined more readily, because the workpiece is gaged before its shape can be changed by removal from the machine

  2. A level set methodology for predicting the effect of mask wear on surface evolution of features in abrasive jet micro-machining

    International Nuclear Information System (INIS)

    Burzynski, T; Papini, M

    2012-01-01

    A previous implementation of narrow-band level set methodology developed by the authors was extended to allow for the modelling of mask erosive wear in abrasive jet micro-machining (AJM). The model permits the prediction of the surface evolution of both the mask and the target simultaneously, by representing them as a hybrid and continuous mask–target surface. The model also accounts for the change in abrasive mass flux incident to both the target surface and, for the first time, the eroding mask edge, that is brought about by the presence of the mask edge itself. The predictions of the channel surface and eroded mask profiles were compared with measurements on channels machined in both glass and poly-methyl-methacrylate (PMMA) targets at both normal and oblique incidence, using tempered steel and elastomeric masks. A much better agreement between the predicted and measured profiles was found when mask wear was taken into account. Mask wear generally resulted in wider and deeper glass target profiles and wider PMMA target profiles, respectively, when compared to cases where no mask wear was present. This work has important implications for the AJM of complex MEMS and microfluidic devices that require longer machining times. (paper)

  3. Micromachined sensor and actuator research at Sandia`s Microelectronics Development Laboratory

    Energy Technology Data Exchange (ETDEWEB)

    Smith, J.H.

    1996-11-01

    An overview of the surface micromachining program at the Microelectronics Development Laboratory of Sandia National Laboratories is presented. Development efforts are underway for a variety of surface micromachined sensors and actuators for both defense and commercial applications. A technology that embeds micromechanical devices below the surface of the wafer prior to microelectronics fabrication has been developed for integrating microelectronics with surface-micromachined micromechanical devices. The application of chemical-mechanical polishing to increase the manufacturability of micromechanical devices is also presented.

  4. Surface processing by high power excimer laser

    International Nuclear Information System (INIS)

    Stehle, M.

    1995-01-01

    Surface processing with lasers is a promising field of research and applications because lasers bring substantial advantages : laser beams work at distance, laser treatments are clean in respect of environment consideration and they offer innovative capabilities for surface treatment which cannot be reached by other way. Excimer lasers are pulsed, gaseous lasers which emit in UV spectral range - the most common are XeCl (308 nm), KrF (248 nm), ArF (193 nm). From 1980 up to 1994, many of them have been used for research, medical and industrial applications such as spectroscopy, PRK (photo-refractive keratotomy) and micro-machining. In the last six years, from 1987 up to 1993, efforts have been done in order to jump from 100 W average power up to 1 kW for XeCl laser at λ = 308 nm. It was the aim of AMMTRA project in Japan as EU205 and EU213 Eureka projects in Europe. In this framework, SOPRA developed VEL (Very large Excimer Laser). In 1992, 1 kW (10 J x 100 Hz) millstone has been reached for the first time, this technology is based on X-Ray preionization and large laser medium (5 liters). Surface treatments based on this laser source are the main purpose of VEL Lasers. Some of them are given for instance : a) Turbine blades made with metallic substrate and ceramic coatings on the top, are glazed in order to increase corrosion resistance of ceramic and metal sandwich. b) Selective ablation of organic coatings deposited on fragile composite material is investigated in Aerospace industry. c) Chock hardening of bulk metallic materials or alloys are investigated for automotive industry in order to increase wear resistance. d) Ablation of thin surface oxides of polluted steels are under investigation in nuclear industry for decontamination. (J.P.N.)

  5. Silicon Micromachining for Terahertz Component Development

    Science.gov (United States)

    Chattopadhyay, Goutam; Reck, Theodore J.; Jung-Kubiak, Cecile; Siles, Jose V.; Lee, Choonsup; Lin, Robert; Mehdi, Imran

    2013-01-01

    Waveguide component technology at terahertz frequencies has come of age in recent years. Essential components such as ortho-mode transducers (OMT), quadrature hybrids, filters, and others for high performance system development were either impossible to build or too difficult to fabricate with traditional machining techniques. With micromachining of silicon wafers coated with sputtered gold it is now possible to fabricate and test these waveguide components. Using a highly optimized Deep Reactive Ion Etching (DRIE) process, we are now able to fabricate silicon micromachined waveguide structures working beyond 1 THz. In this paper, we describe in detail our approach of design, fabrication, and measurement of silicon micromachined waveguide components and report the results of a 1 THz canonical E-plane filter.

  6. Surface-micromachined magnetic undulator with period length between 10  μm and 1 mm for advanced light sources

    Directory of Open Access Journals (Sweden)

    Jere Harrison

    2012-07-01

    Full Text Available A technological gap exists between the μm-scale wiggling periods achieved using electromagnetic waves of high intensity laser pulses and the mm scale of permanent-magnet and superconducting undulators. In the sub-mm range, surface-micromachined soft-magnetic micro-electro-mechanical system inductors with integrated solenoidal coils have already experimentally demonstrated 100 to 500 mT field amplitude across air gaps as large as 15  μm. Simulations indicate that magnetic fields as large as 1.5 T across 50  μm inductor gaps are feasible. A simple rearranging of the yoke and pole geometry allows for fabrication of 10+ cm long undulator structures with period lengths between 12.5  μm and 1 mm. Such undulators find application both in high average power spontaneous emission sources and, if used in combination with ultrahigh-brightness electron beams, could lead to the realization of low energy compact free-electron lasers. Challenges include electron energy broadening due to wakefields and Joule heating in the electromagnet.

  7. Laser Micromachining and Information Discovery Using a Dual Beam Interferometry

    Energy Technology Data Exchange (ETDEWEB)

    Theppakuttaikomaraswamy, Senthil P. [Iowa State Univ., Ames, IA (United States)

    2001-01-01

    Lasers have proven to be among the most promising tools for micromachining because they can process features down to the size of the laser wavelength (smaller than 1 micrometer) and they provide a non-contact technology for machining. The demand for incorporating in-situ diagnostics technology into the micromachining environment is driven by the increasing need for producing micro-parts of high quality and accuracy. Laser interferometry can be used as an on-line monitoring tool and it is the aim of this work to enhance the understanding and application of Michelson interferometry principle for the in-situ diagnostics of the machining depth on the sub-micron and micron scales. micromachining is done on two different materials and a comprehensive investigation is done to control the width and depth of the machined feature. To control the width of the feature, laser micromachining is done on copper and a detailed analysis is performed. The objective of this experiment is to make a precision mask for sputtering with an array of holes on it using an Nd:YAG laser of 532 nm wavelength. The diameter of the hole is 50 μm and the spacing between holes (the distance between the centers) is 100 μm. Michelson interferometer is integrated with a laser machining system to control the depth of machining. An excimer laser of 308 nm wavelength is used for micromachining. A He-Ne laser of 632.8 nm wavelength is used as the light source for the interferometer. Interference patterns are created due to the change in the path length between the two interferometer arms. The machined depth information is obtained from the interference patterns on an oscilloscope detected by a photodiode. To compare the predicted depth by the interferometer with the true machining depth, a surface profilometer is used to measure the actual machining depth on the silicon. It is observed that the depths of machining obtained by the surface profile measurement are in accordance with the interferometer

  8. Mechanical Micro-Machining and Laser Micro-Machining

    Science.gov (United States)

    Lou, Ning

    Ever since the 2000s, the manufacturing industry has gained tremendous development in terms of precision. Therefore, micro-machining as a cutting-edge technique has drawn more and more attention in precision-machining realm and been able to take on challenges brought by this. This doctoral program explores the micro-machining realm and results are consisted of two major parts. First, the machinability of "difficult-to-cut" materials is of interest where Inconel 718 is selected as its characteristics include outstanding strength and lackluster thermal conductivity. For its extraordinary hardness and sustainability, coated cemented carbide tools are selected for micro-endmilling processes on Inconel. The cutting forces along x and y axis, respectively, are analyzed to reveal any impact from the inputs. Moreover, the chip morphology is examined. Suggestions are made for future research guidance. As first part serves as preliminary work of the program, the research carries onto the second part - laser micro-machining which is considerably different from conventional machining. The laser being considered employs pulsewidth in realm of picosecond (10-12 s) and frequency of tens of kilohertz. This results in a very small energy distribution per pulse (microJ) and is called ultrafast or ultrashort laser machining. To study this type of technology, an all-new machining system needs to be built incorporating highly advanced apparatus such as laser head, scan head, attenuator, and beam expander, et al. From exit of laser head to workpiece, laser need to travel through all optical components and any deviation may leads to severe out-of-focus error as the depth of focus is within micron level. Thus, optical alignment along laser travelling route is key to successful machining results. This part of research focuses on the design and assembly of this system as a reliable structure offering both support and alignment to the laser delivery. 3-Dimentional (3D) Computer

  9. Micromachining Lithium Niobate for Rapid Prototyping of Resonant Biosensors

    International Nuclear Information System (INIS)

    Al-Shibaany, Zeyad Yousif Abdoon; Hedley, John; Huo, Dehong; Hu, Zhongxu

    2014-01-01

    Lithium niobate material is widely used in MEMS application due to its piezoelectric properties. This paper presents the micromachining process of lithium niobate to rapid prototype a resonant biosensor design. A high precision CNC machine was used to machine a sample of lithium niobate material at 5 different spindle speeds to find out the best conditions to machine this brittle material. A qualitative visual check of the surface was performed by using scanning electron microscopy, surface roughness was quantitatively investigated using an optical surface profiler and Raman spectroscopy to check the strain of the surface. Results show that the surface quality of the lithium niobate was significantly affected by the spindle speed with optimum conditions at 70k rpm giving a strained surface with 500 nm rms roughness

  10. Micromachining of AlN and Al2O3 Using Fiber Laser

    Directory of Open Access Journals (Sweden)

    Florian Preusch

    2014-11-01

    Full Text Available We report on high precision high speed micromachining of Al2O3 and AlN using pulsed near infrared fiber laser. Ablation thresholds are determined to be 30 J/cm2 for alumina and 18 J/cm2 for aluminum nitride. The factors influencing the efficiency and quality of 3D micromachining, namely the surface roughness, the material removal rate and the ablation depth accuracy are determined as a function of laser repetition rate and pulse overlap. Using a fluence of 64 J/cm², we achieve a material removal rate of up to 94 mm³/h in Al2O3 and 135 mm³/h in AlN for high pulse overlaps (89% and 84%. A minimum roughness of 1.5 μm for alumina and 1.65 μm for aluminum nitride can be accomplished for medium pulse overlaps (42% to 56%. In addition, ablation depth deviation of the micromachining process of smaller than 8% for alumina and 2% for aluminum nitride are achieved. Based on these results, by structuring exemplarily 3D structures we demonstrate the potential of high quality and efficient 3D micromachining using pulsed fiber laser.

  11. Micro-machined resonator oscillator

    Science.gov (United States)

    Koehler, Dale R.; Sniegowski, Jeffry J.; Bivens, Hugh M.; Wessendorf, Kurt O.

    1994-01-01

    A micro-miniature resonator-oscillator is disclosed. Due to the miniaturization of the resonator-oscillator, oscillation frequencies of one MHz and higher are utilized. A thickness-mode quartz resonator housed in a micro-machined silicon package and operated as a "telemetered sensor beacon" that is, a digital, self-powered, remote, parameter measuring-transmitter in the FM-band. The resonator design uses trapped energy principles and temperature dependence methodology through crystal orientation control, with operation in the 20-100 MHz range. High volume batch-processing manufacturing is utilized, with package and resonator assembly at the wafer level. Unique design features include squeeze-film damping for robust vibration and shock performance, capacitive coupling through micro-machined diaphragms allowing resonator excitation at the package exterior, circuit integration and extremely small (0.1 in. square) dimensioning. A family of micro-miniature sensor beacons is also disclosed with widespread applications as bio-medical sensors, vehicle status monitors and high-volume animal identification and health sensors. The sensor family allows measurement of temperatures, chemicals, acceleration and pressure. A microphone and clock realization is also available.

  12. Micromachining with copper lasers

    Science.gov (United States)

    Knowles, Martyn R. H.; Bell, Andy; Foster-Turner, Gideon; Rutterford, Graham; Chudzicki, J.; Kearsley, Andrew J.

    1997-04-01

    In recent years the copper laser has undergone extensive development and has emerged as a leading and unique laser for micromachining. The copper laser is a high average power (10 - 250 W), high pulse repetition rate (2 - 32 kHz), visible laser (511 nm and 578 nm) that produces high peak power (typically 200 kW), short pulses (30 ns) and very good beam quality (diffraction limited). This unique set of laser parameters results in exceptional micro-machining in a wide variety of materials. Typical examples of the capabilities of the copper laser include the drilling of small holes (10 - 200 micrometer diameter) in materials as diverse as steel, ceramic, diamond and polyimide with micron precision and low taper (less than 1 degree) cutting and profiling of diamond. Application of the copper laser covers the electronic, aerospace, automotive, nuclear, medical and precision engineering industries.

  13. Surface photo reaction processes using synchrotron radiation; Hoshako reiki ni yoru hyomenko hanno process

    Energy Technology Data Exchange (ETDEWEB)

    Imaizumi, Y. [Tohoku University, Sendai (Japan). Institute for Materials Research; Yoshigoe, A. [Toyohashi University of Technology, Aichi (Japan); Urisu, T. [Toyohashi University of Technology, Aichi (Japan). Institute for Molecular Science

    1997-08-20

    This paper introduces the surface photo reaction processes using synchrotron radiation, and its application. A synchrotron radiation process using soft X-rays contained in electron synchrotron radiated light as an excited light source has a possibility of high-resolution processing because of its short wave length. The radiated light can excite efficiently the electronic state of a substance, and can induce a variety of photochemical reactions. In addition, it can excite inner shell electrons efficiently. In the aspect of its application, it has been found that, if radiated light is irradiated on surfaces of solids under fluorine-based reaction gas or Cl2, the surfaces can be etched. This technology is utilized practically. With regard to radiated light excited CVD process, it may be said that anything that can be deposited by the ordinary plasma CVD process can be deposited. Its application to epitaxial crystal growth may be said a nano processing application in thickness direction, such as forming an ultra-lattice structure, the application being subjected to expectation. In micromachine fabricating technologies, a possibility is searched on application of a photo reaction process of the radiated light. 5 refs., 6 figs.

  14. Advanced technology trend survey of micromachines in Europe; Oshu ni okeru micromachine sentan gijutsu doko chosa

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1996-02-01

    In this research survey, the development trend of micromachine technology in Europe was surveyed, development level of micromachine technology of European companies was grasped, and practical application fields of their target were investigated. Technology development level of private companies in Japan`s national projects and practical application fields of Japan`s target were arranged. Trends of micromachine technology development are compared between Japanese companies and European companies. Among micromachine technology development projects in Europe, ``8520 MUST`` is a part of the ESPRIT Project. About 40,000 companies among about 170,000 companies in whole Europe are relating to the MUST Project. The main fields include the manufacturing technology, process control of machines, technology of safety, sensor technology in environmental fields, and automotive technology. The marketing fields of application include the automobile, military technology, home automation, industrial process, medical technology, environmental technology, and games. The results can be compared with the direction of research and development in Japan. 22 figs., 8 tabs.

  15. Fabrication of three-dimensional microdisk resonators in calcium fluoride by femtosecond laser micromachining

    Science.gov (United States)

    Lin, Jintian; Xu, Yingxin; Tang, Jialei; Wang, Nengwen; Song, Jiangxin; He, Fei; Fang, Wei; Cheng, Ya

    2014-09-01

    We report on fabrication of on-chip calcium fluoride (CaF2) microdisk resonators using water-assisted femtosecond laser micromachining. Focused ion beam (FIB) milling is used to create ultra-smooth sidewalls. The quality ( Q) factors of the fabricated microresonators are measured to be 4.2 × 104 at wavelengths near 1,550 nm. The Q factor is mainly limited by the scattering from the bottom surface of the disk whose roughness remains high due to the femtosecond laser micromachining process. This technique facilitates the formation of on-chip microresonators on various kinds of bulk crystalline materials, which can benefit a wide range of applications such as nonlinear optics, quantum optics, and chip-level integration of photonic devices.

  16. Micromachining with Nanostructured Cutting Tools

    CERN Document Server

    Jackson, Mark J

    2013-01-01

    The purpose of the brief is to explain how nanostructured tools can be used to machine materials at the microscale.  The aims of the brief are to explain to readers how to apply nanostructured tools to micromachining applications. This book describes the application of nanostructured tools to machining engineering materials and includes methods for calculating basic features of micromachining. It explains the nature of contact between tools and work pieces to build a solid understanding of how nanostructured tools are made.

  17. Fiber laser micromachining of magnesium alloy tubes for biocompatible and biodegradable cardiovascular stents

    Science.gov (United States)

    Demir, Ali Gökhan; Previtali, Barbara; Colombo, Daniele; Ge, Qiang; Vedani, Maurizio; Petrini, Lorenza; Wu, Wei; Biffi, Carlo Alberto

    2012-02-01

    Magnesium alloys constitute an attractive solution for cardiovascular stent applications due to their intrinsic properties of biocompatibility and relatively low corrosion resistance in human-body fluids, which results in as a less intrusive treatment. Laser micromachining is the conventional process used to cut the stent mesh, which plays the key role for the accurate reproduction of the mesh design and the surface quality of the produced stent that are important factors in ensuring the mechanical and corrosion resistance properties of such a kind of devices. Traditionally continuous or pulsed laser systems working in microsecond pulse regime are employed for stent manufacturing. Pulsed fiber lasers on the other hand, are a relatively new solution which could balance productivity and quality aspects with shorter ns pulse durations and pulse energies in the order of mJ. This work reports the study of laser micromachining and of AZ31 magnesium alloy for the manufacturing of cardiovascular stents with a novel mesh design. A pulsed active fiber laser system operating in nanosecond pulse regime was employed for the micromachining. Laser parameters were studied for tubular cutting on a common stent material, AISI 316L tubes with 2 mm in diameter and 0.2 mm in thickness and on AZ31 tubes with 2.5 mm in diameter and 0.2 in thickness. In both cases process parameters conditions were examined for reactive and inert gas cutting solutions and the final stent quality is compared.

  18. Implant surfaces and interface processes.

    Science.gov (United States)

    Kasemo, B; Gold, J

    1999-06-01

    The past decades and current R&D of biomaterials and medical implants show some general trends. One major trend is an increased degree of functionalization of the material surface, better to meet the demands of the biological host system. While the biomaterials of the past and those in current use are essentially bulk materials (metals, ceramics, polymers) or special compounds (bioglasses), possibly with some additional coating (e.g., hydroxyapatite), the current R&D on surface modifications points toward much more complex and multifunctional surfaces for the future. Such surface modifications can be divided into three classes, one aiming toward an optimized three-dimensional physical microarchitecture of the surface (pore size distributions, "roughness", etc.), the second one focusing on the (bio) chemical properties of surface coatings and impregnations (ion release, multi-layer coatings, coatings with biomolecules, controlled drug release, etc.), and the third one dealing with the viscoelastic properties (or more generally the micromechanical properties) of material surfaces. These properties are expected to affect the interfacial processes cooperatively, i.e., there are likely synergistic effects between and among them: The surface is "recognized" by the biological system through the combined chemical and topographic pattern of the surface, and the viscoelastic properties. In this presentation, the development indicated above is discussed briefly, and current R&D in this area is illustrated with a number of examples from our own research. The latter include micro- and nanofabrication of surface patterns and topographies by the use of laser machining, photolithographic techniques, and electron beam and colloidal lithographies to produce controlled structures on implant surfaces in the size range 10 nm to 100 microns. Examples of biochemical modifications include mono- or lipid membranes and protein coatings on different surfaces. A new method to evaluate, e

  19. Capacitive micromachined ultrasonic transducer based tilt sensing

    Science.gov (United States)

    Yu, Hongbin; Guo, Bin; Haridas, Kuruveettil; Lin, Tsu-Hui; Hao Cheong, Jia; Lin Tsai, Ming; Boon Yee, Tack

    2012-10-01

    In this paper, a tilt sensing mechanism based on the capacitive micromachined ultrasound transducers (CMUTs) is presented. By measuring the difference in the time of flight of various pulse-echo signals from different CMUT transmitting elements to one common receiving element in the oil bath, the tilt angle of the oil surface can be determined. With the proposed device, the maximum tilt angles of 20° and 28° have been measured in the clockwise and counterclockwise directions, respectively, and the difference between the measured and the theoretical values of the tilt angle was found to be within 0.05° during the whole test.

  20. Robust Design of an Optical Micromachine for an Ophthalmic Application

    Directory of Open Access Journals (Sweden)

    Ingo Sieber

    2016-05-01

    Full Text Available This article describes an approach to the robust design of an optical micromachine consisting of a freeform optics, an amplification linkage, and an actuator. The robust design approach consists of monolithic integration principles to minimize assembly efforts and of an optimization of the functional components with respect to robustness against remaining assembly and manufacturing tolerances. The design approach presented involves the determination of the relevant tolerances arising from the domains manufacturing, assembly, and operation of the micromachine followed by a sensitivity analysis with the objective of identifying the worst offender. Subsequent to the above-described steps, an optimization of the functional design of the freeform optics with respect to a compensation of the effects of the tolerances is performed. The result leads to a robust design of the freeform optics and hence ensures a defined and optimal minimum performance of the micromachine in the presence of tolerances caused by the manufacturing processes and the operation of the micromachine. The micromachine under discussion is the tunable optics of an ophthalmic implant, an artificial accommodation system recently realized as a demonstration model at a scale of 2:1. The artificial accommodation system will be developed to replace the human crystalline lens in the case of a cataract.

  1. Nanoscale processes on insulating surfaces

    National Research Council Canada - National Science Library

    Gnecco, Enrico; Szymoński, Marek

    2009-01-01

    ... the group of Prof. Ernst Meyer in Basel, where he investigated friction processes on alkali halide surfaces in ultra high vacuum (UHV). The main result was the observation of a logarithmic velocity dependence of atomic friction, which was interpreted within a combination of the classical Tomlinson and Eyring models. After his Ph.D. he joined the ...

  2. Electron beam micromachining of plastics

    Czech Academy of Sciences Publication Activity Database

    Dupák, Libor

    2014-01-01

    Roč. 49, 5-6 (2014), s. 310-314 ISSN 0861-4717 R&D Projects: GA MŠk(CZ) LO1212; GA MŠk ED0017/01/01; GA MŠk EE.2.3.20.0103 Institutional support: RVO:68081731 Keywords : micromachining of plastics * Electron beam Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

  3. Bionics: prcise color tuning by interference in nature and technology-applications in surface-micromachined 1.55μm vertical air-cavity filters

    Science.gov (United States)

    Hillmer, Hartmut; Daleiden, Juergen; Prott, Cornelia; Irmer, Soeren; Roemer, Friedhard; Ataro, Edwin; Tarraf, Amer; Ruehling, H.; Maniak, Markus; Strassner, Martin

    2003-01-01

    Bionics transfers the principles of success of nature into natural science, engineering disciplines and applications. Often generation and detection of different spectral colors play key roles in communication in both, nature and technology. The latter one refers e.g. to dense wavelength division multiplex optical communication systems. This paper shows interesting parallels in tunable spectral light filtering by butterfly wings and by tunable optical filters used in optical communication systems. In both cases light interferes constructively and destructively with nano- and microstructures of appropriate shape, dimensions and materials. In this paper methodology is strongly emphasized. We demonstrate that tailored scaling allows the effectiveness of physical effects to be enhanced in nature and technology. These principles are rigorously applied in micromachined 1.55μm vertical-resonator-based filters, capable of wide, continuous, monotonic and kink-free tuning by a single control parameter. Tuning is achieved by mechanically actuating one or several membranes embedded by air-gaps in a vertical resonator including two ultra-highly reflective DBR mirrors. The layers of mirrors reveal a very strong refractive index contrast. Filters including InP/air-gap DBR's (3.5 periods) using GaInAs sacrificial layers reveal a continuous tuning of >9% of the absolute wavelength. Varying a reverse voltage (U=0 .. -3.2V) between the membranes, a tuning range up to 142nm was obtained due to electrostatic actuation. Appropriate miniaturization is shown to increase the mechanical stability and the effectiveness of spectral tuning by electrostatic actuation since the relative significance of the fundamental physical forces can be shifted considerably by appropriate scaling.

  4. Demonstration of robust micromachined jet technology and its application to realistic flow control problems

    Energy Technology Data Exchange (ETDEWEB)

    Chang, Sung Pil [Inha University, Incheon (Korea, Republic of)

    2006-04-15

    This paper describes the demonstration of successful fabrication and initial characterization of micromachined pressure sensors and micromachined jets (microjets) fabricated for use in macro flow control and other applications. In this work, the microfabrication technology was investigated to create a micromachined fluidic control system with a goal of application in practical fluids problems, such as UAV (Unmanned Aerial Vehicle)-scale aerodynamic control. Approaches of this work include : (1) the development of suitable micromachined synthetic jets (microjets) as actuators, which obviate the need to physically extend micromachined structures into an external flow ; and (2) a non-silicon alternative micromachining fabrication technology based on metallic substrates and lamination (in addition to traditional MEMS technologies) which will allow the realization of larger scale, more robust structures and larger array active areas for fluidic systems. As an initial study, an array of MEMS pressure sensors and an array of MEMS modulators for orifice-based control of microjets have been fabricated, and characterized. Both pressure sensors and modulators have been built using stainless steel as a substrate and a combination of lamination and traditional micromachining processes as fabrication technologies.

  5. Development of a Novel Transparent Flexible Capacitive Micromachined Ultrasonic Transducer.

    Science.gov (United States)

    Pang, Da-Chen; Chang, Cheng-Min

    2017-06-20

    This paper presents the world's first transparent flexible capacitive micromachined ultrasonic transducer (CMUT) that was fabricated through a roll-lamination technique. This polymer-based CMUT has advantages of transparency, flexibility, and non-contacting detection which provide unique functions in display panel applications. Comprising an indium tin oxide-polyethylene terephthalate (ITO-PET) substrate, SU-8 sidewall and vibrating membranes, and silver nanowire transparent electrode, the transducer has visible-light transmittance exceeding 80% and can operate on curved surfaces with a 40 mm radius of curvature. Unlike the traditional silicon-based high temperature process, the CMUT can be fabricated on a flexible substrate at a temperature below 100 °C to reduce residual stress introduced at high temperature. The CMUT on the curved surfaces can detect a flat target and finger at distances up to 50 mm and 40 mm, respectively. The transparent flexible CMUT provides a better human-machine interface than existing touch panels because it can be integrated with a display panel for non-contacting control in a health conscious environment and the flexible feature is critical for curved display and wearable electronics.

  6. Development of a Novel Transparent Flexible Capacitive Micromachined Ultrasonic Transducer

    Directory of Open Access Journals (Sweden)

    Da-Chen Pang

    2017-06-01

    Full Text Available This paper presents the world’s first transparent flexible capacitive micromachined ultrasonic transducer (CMUT that was fabricated through a roll-lamination technique. This polymer-based CMUT has advantages of transparency, flexibility, and non-contacting detection which provide unique functions in display panel applications. Comprising an indium tin oxide-polyethylene terephthalate (ITO-PET substrate, SU-8 sidewall and vibrating membranes, and silver nanowire transparent electrode, the transducer has visible-light transmittance exceeding 80% and can operate on curved surfaces with a 40 mm radius of curvature. Unlike the traditional silicon-based high temperature process, the CMUT can be fabricated on a flexible substrate at a temperature below 100 °C to reduce residual stress introduced at high temperature. The CMUT on the curved surfaces can detect a flat target and finger at distances up to 50 mm and 40 mm, respectively. The transparent flexible CMUT provides a better human-machine interface than existing touch panels because it can be integrated with a display panel for non-contacting control in a health conscious environment and the flexible feature is critical for curved display and wearable electronics.

  7. Micromachined Ultrasonic Transducers for 3-D Imaging

    DEFF Research Database (Denmark)

    Christiansen, Thomas Lehrmann

    of state-of-the-art 3-D ultrasound systems. The focus is on row-column addressed transducer arrays. This previously sparsely investigated addressing scheme offers a highly reduced number of transducer elements, resulting in reduced transducer manufacturing costs and data processing. To produce...... such transducer arrays, capacitive micromachined ultrasonic transducer (CMUT) technology is chosen for this project. Properties such as high bandwidth and high design flexibility makes this an attractive transducer technology, which is under continuous development in the research community. A theoretical...... capable of producing 62+62-element row-column addressed CMUT arrays with negligible charging issues. The arrays include an integrated apodization, which reduces the ghost echoes produced by the edge waves in such arrays by 15:8 dB. The acoustical cross-talk is measured on fabricated arrays, showing a 24 d...

  8. Micro-machined calorimetric biosensors

    Science.gov (United States)

    Doktycz, Mitchel J.; Britton, Jr., Charles L.; Smith, Stephen F.; Oden, Patrick I.; Bryan, William L.; Moore, James A.; Thundat, Thomas G.; Warmack, Robert J.

    2002-01-01

    A method and apparatus are provided for detecting and monitoring micro-volumetric enthalpic changes caused by molecular reactions. Micro-machining techniques are used to create very small thermally isolated masses incorporating temperature-sensitive circuitry. The thermally isolated masses are provided with a molecular layer or coating, and the temperature-sensitive circuitry provides an indication when the molecules of the coating are involved in an enthalpic reaction. The thermally isolated masses may be provided singly or in arrays and, in the latter case, the molecular coatings may differ to provide qualitative and/or quantitative assays of a substance.

  9. The Cooling and Lubrication Performance of Graphene Platelets in Micro-Machining Environments

    Science.gov (United States)

    Chu, Bryan

    The research presented in this thesis is aimed at investigating the use of graphene platelets (GPL) to address the challenges of excessive tool wear, reduced part quality, and high specific power consumption encountered in micro-machining processes. There are two viable methods of introducing GPL into micro-machining environments, viz., the embedded delivery method, where the platelets are embedded into the part being machined, and the external delivery method, where graphene is carried into the cutting zone by jetting or atomizing a carrier fluid. The study involving the embedded delivery method is focused on the micro-machining performance of hierarchical graphene composites. The results of this study show that the presence of graphene in the epoxy matrix improves the machinability of the composite. In general, the tool wear, cutting forces, surface roughness, and extent of delamination are all seen to be lower for the hierarchical composite when compared to the conventional two-phase glass fiber composite. These improvements are attributed to the fact that graphene platelets improve the thermal conductivity of the matrix, provide lubrication at the tool-chip interface and also improve the interface strength between the glass fibers and the matrix. The benefits of graphene are seen to also carry over to the external delivery method. The platelets provide improved cooling and lubrication performance to both environmentally-benign cutting fluids as well as to semi-synthetic cutting fluids used in micro-machining. The cutting performance is seen to be a function of the geometry (i.e., lateral size and thickness) and extent of oxygen-functionalization of the platelet. Ultrasonically exfoliated platelets (with 2--3 graphene layers and lowest in-solution characteristic lateral length of 120 nm) appear to be the most favorable for micro-machining applications. Even at the lowest concentration of 0.1 wt%, they are capable of providing a 51% reduction in the cutting

  10. EFAB: A novel, high-aspect-ratio true three-dimensional microfabrication process for rapid, low-cost desktop micromachining of MEMS

    Science.gov (United States)

    Zhang, Gang

    1999-11-01

    Instant Masking, the core technique in EFAB (E&barbelow;lectrochemical FABrication), uses an Instant Mask to realize instant selective plating which speeds up present time-consuming 3-D fabrication processes. One method for fabrication of the silicone-base Instant Mask in presented in detail. Several basic performance characteristics of this Instant Mask were investigated. The major limitation of the Instant Mask is its short service lifetime due to delamination of the silicone rubber during Instant Masking plating. A BTA (Benzotriazole) surface modification method was proposed to extend the immersion lifetime of the Instant Mask in the plating bath. The electrochemical polarization method was used to study the cathodic and anodic processes in Instant Masking plating. Proper bath selection and modification are critical in Instant Masking plating. The performance of bulk nickel plating was investigated by DC electrochemical methods to adjust the related process parameters for meeting EFAB requirements. Internal stress in the deposits could cause failure of microstructures. The flexible strip method was employed to measure internal stresses in deposits produced under different conditions. The use of proper plating parameters and stress reducers can effectively reduce stress in the deposits. To obtain a layered microstructure, the adhesion between adjacent layers is very important. It was found that surface activation prior to plating is a critical step to achieve good adhesion. The effectiveness of several activation methods in increasing the adhesion of nickel deposits was evaluated by adhesion tests. Diamond lapping was chosen as the planarization process. Its operation procedure and limitations are described. Copper etching is the last step in the EFAB process. Both chemical and electrochemical etching were studied and it was found that a commercial chemical etching product worked well for copper etching. The electrochemical etching tests indicated that

  11. Erosion and lateral surface processes

    Science.gov (United States)

    : Erosion can cause serious agricultural and environmental hazards. It can generate severe damage to the landscape, lead to significant loss of agricultural land and consequently to reduction in agricultural productivity, induce surface water pollution due to the transport of sediments and suspende...

  12. Surface studies of plasma processed Nb samples

    International Nuclear Information System (INIS)

    Tyagi, Puneet V.; Doleans, Marc; Hannah, Brian S.; Afanador, Ralph; Stewart, Stephen; Mammosser, John; Howell, Matthew P; Saunders, Jeffrey W; Degraff, Brian D; Kim, Sang-Ho

    2015-01-01

    Contaminants present at top surface of superconducting radio frequency (SRF) cavities can act as field emitters and restrict the cavity accelerating gradient. A room temperature in-situ plasma processing technology for SRF cavities aiming to clean hydrocarbons from inner surface of cavities has been recently developed at the Spallation Neutron Source (SNS). Surface studies of the plasma-processed Nb samples by Secondary ion mass spectrometry (SIMS) and Scanning Kelvin Probe (SKP) showed that the NeO 2 plasma processing is very effective to remove carbonaceous contaminants from top surface and improves the surface work function by 0.5 to 1.0 eV.

  13. Surface studies of plasma processed Nb samples

    Energy Technology Data Exchange (ETDEWEB)

    Tyagi, Puneet V. [Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Spallation Neutron Source (SNS); Doleans, Marc [Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Spallation Neutron Source (SNS); Hannah, Brian S. [Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Spallation Neutron Source (SNS); Afanador, Ralph [Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Spallation Neutron Source (SNS); Stewart, Stephen [Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Spallation Neutron Source (SNS); Mammosser, John [Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Spallation Neutron Source (SNS); Howell, Matthew P [Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Spallation Neutron Source (SNS); Saunders, Jeffrey W [Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Spallation Neutron Source (SNS); Degraff, Brian D [Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Spallation Neutron Source (SNS); Kim, Sang-Ho [Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Spallation Neutron Source (SNS)

    2015-01-01

    Contaminants present at top surface of superconducting radio frequency (SRF) cavities can act as field emitters and restrict the cavity accelerating gradient. A room temperature in-situ plasma processing technology for SRF cavities aiming to clean hydrocarbons from inner surface of cavities has been recently developed at the Spallation Neutron Source (SNS). Surface studies of the plasma-processed Nb samples by Secondary ion mass spectrometry (SIMS) and Scanning Kelvin Probe (SKP) showed that the NeO2 plasma processing is very effective to remove carbonaceous contaminants from top surface and improves the surface work function by 0.5 to 1.0 eV.

  14. Fabrication of capacitive micromachined ultrasonic transducers based on adhesive wafer bonding technique

    International Nuclear Information System (INIS)

    Li, Zhenhao; Wong, Lawrence L P; Chen, Albert I H; Na, Shuai; Yeow, John T W; Sun, Jame

    2016-01-01

    This paper reports the fabrication process of wafer bonded capacitive micromachined ultrasonic transducers (CMUTs) using photosensitive benzocyclobutene as a polymer adhesive. Compared with direct bonding and anodic bonding, polymer adhesive bonding provides good tolerance to wafer surface defects and contamination. In addition, the low process temperature of 250 °C is compatible with standard CMOS processes. Single-element CMUTs consisting of cells with a diameter of 46 µ m and a cavity depth of 323 nm were fabricated. In-air and immersion acoustic characterizations were performed on the fabricated CMUTs, demonstrating their capability for transmitting and receiving ultrasound signals. An in-air resonance frequency of 5.47 MHz was measured by a vibrometer under a bias voltage of 300 V. (paper)

  15. Micromachined Thermal Flow Sensors—A Review

    Directory of Open Access Journals (Sweden)

    Jonathan T. W. Kuo

    2012-07-01

    Full Text Available Microfabrication has greatly matured and proliferated in use amongst many disciplines. There has been great interest in micromachined flow sensors due to the benefits of miniaturization: low cost, small device footprint, low power consumption, greater sensitivity, integration with on-chip circuitry, etc. This paper reviews the theory of thermal flow sensing and the different configurations and operation modes available. Material properties relevant to micromachined thermal flow sensing and selection criteria are also presented. Finally, recent applications of micromachined thermal flow sensors are presented. Detailed tables of the reviewed devices are included.

  16. Silicon micromachining using a high-density plasma source

    International Nuclear Information System (INIS)

    McAuley, S.A.; Ashraf, H.; Atabo, L.; Chambers, A.; Hall, S.; Hopkins, J.; Nicholls, G.

    2001-01-01

    Dry etching of Si is critical in satisfying the demands of the micromachining industry. The micro-electro-mechanical systems (MEMS) community requires etches capable of high aspect ratios, vertical profiles, good feature size control and etch uniformity along with high throughput to satisfy production requirements. Surface technology systems' (STS's) high-density inductively coupled plasma (ICP) etch tool enables a wide range of applications to be realized whilst optimizing the above parameters. Components manufactured from Si using an STS ICP include accelerometers and gyroscopes for military, automotive and domestic applications. STS's advanced silicon etch (ASE TM ) has also allowed the first generation of MEMS-based optical switches and attenuators to reach the marketplace. In addition, a specialized application for fabricating the next generation photolithography exposure masks has been optimized for 200 mm diameter wafers, to depths of ∼750 μm. Where the profile is not critical, etch rates of greater than 8 μm min -1 have been realized to replace previous methods such as wet etching. This is also the case for printer applications. Specialized applications that require etching down to pyrex or oxide often result in the loss of feature size control at the interface; this is an industry wide problem. STS have developed a technique to address this. The rapid progression of the industry has led to development of the STS ICP etch tool, as well as the process. (author)

  17. SummitView 1.0: a code to automatically generate 3D solid models of surface micro-machining based MEMS designs.

    Energy Technology Data Exchange (ETDEWEB)

    McBride, Cory L. (Elemental Technologies, American Fort, UT); Yarberry, Victor R.; Schmidt, Rodney Cannon; Meyers, Ray J. (Elemental Technologies, American Fort, UT)

    2006-11-01

    This report describes the SummitView 1.0 computer code developed at Sandia National Laboratories. SummitView is designed to generate a 3D solid model, amenable to visualization and meshing, that represents the end state of a microsystem fabrication process such as the SUMMiT (Sandia Ultra-Planar Multilevel MEMS Technology) V process. Functionally, SummitView performs essentially the same computational task as an earlier code called the 3D Geometry modeler [1]. However, because SummitView is based on 2D instead of 3D data structures and operations, it has significant speed and robustness advantages. As input it requires a definition of both the process itself and the collection of individual 2D masks created by the designer and associated with each of the process steps. The definition of the process is contained in a special process definition file [2] and the 2D masks are contained in MEM format files [3]. The code is written in C++ and consists of a set of classes and routines. The classes represent the geometric data and the SUMMiT V process steps. Classes are provided for the following process steps: Planar Deposition, Planar Etch, Conformal Deposition, Dry Etch, Wet Etch and Release Etch. SummitView is built upon the 2D Boolean library GBL-2D [4], and thus contains all of that library's functionality.

  18. Description of two-process surface topography

    International Nuclear Information System (INIS)

    Grabon, W; Pawlus, P

    2014-01-01

    After two machining processes, a large number of surface topography measurements were made using Talyscan 150 stylus measuring equipment. The measured samples were divided into two groups. The first group contained two-process surfaces of random nature, while the second group used random-deterministic textures of random plateau parts and portions of deterministic valleys. For comparison, one-process surfaces were also analysed. Correlation and regression analysis was used to study the dependencies among surface texture parameters in 2D and 3D systems. As the result of this study, sets of parameters describing multi-process surface topography were obtained for two-process surfaces of random and of random-deterministic types. (papers)

  19. Surface Modification and Surface - Subsurface Exchange Processes on Europa

    Science.gov (United States)

    Phillips, C. B.; Molaro, J.; Hand, K. P.

    2017-12-01

    The surface of Jupiter's moon Europa is modified by exogenic processes such as sputtering, gardening, radiolysis, sulfur ion implantation, and thermal processing, as well as endogenic processes including tidal shaking, mass wasting, and the effects of subsurface tectonic and perhaps cryovolcanic activity. New materials are created or deposited on the surface (radiolysis, micrometeorite impacts, sulfur ion implantation, cryovolcanic plume deposits), modified in place (thermal segregation, sintering), transported either vertically or horizontally (sputtering, gardening, mass wasting, tectonic and cryovolcanic activity), or lost from Europa completely (sputtering, plumes, larger impacts). Some of these processes vary spatially, as visible in Europa's leading-trailing hemisphere brightness asymmetry. Endogenic geologic processes also vary spatially, depending on terrain type. The surface can be classified into general landform categories that include tectonic features (ridges, bands, cracks); disrupted "chaos-type" terrain (chaos blocks, matrix, domes, pits, spots); and impact craters (simple, complex, multi-ring). The spatial distribution of these terrain types is relatively random, with some differences in apex-antiapex cratering rates and latitudinal variation in chaos vs. tectonic features. In this work, we extrapolate surface processes and rates from the top meter of the surface in conjunction with global estimates of transport and resurfacing rates. We combine near-surface modification with an estimate of surface-subsurface (and vice versa) transport rates for various geologic terrains based on an average of proposed formation mechanisms, and a spatial distribution of each landform type over Europa's surface area. Understanding the rates and mass balance for each of these processes, as well as their spatial and temporal variability, allows us to estimate surface - subsurface exchange rates over the average surface age ( 50myr) of Europa. Quantifying the timescale

  20. Vascular tissue engineering by computer-aided laser micromachining.

    Science.gov (United States)

    Doraiswamy, Anand; Narayan, Roger J

    2010-04-28

    Many conventional technologies for fabricating tissue engineering scaffolds are not suitable for fabricating scaffolds with patient-specific attributes. For example, many conventional technologies for fabricating tissue engineering scaffolds do not provide control over overall scaffold geometry or over cell position within the scaffold. In this study, the use of computer-aided laser micromachining to create scaffolds for vascular tissue networks was investigated. Computer-aided laser micromachining was used to construct patterned surfaces in agarose or in silicon, which were used for differential adherence and growth of cells into vascular tissue networks. Concentric three-ring structures were fabricated on agarose hydrogel substrates, in which the inner ring contained human aortic endothelial cells, the middle ring contained HA587 human elastin and the outer ring contained human aortic vascular smooth muscle cells. Basement membrane matrix containing vascular endothelial growth factor and heparin was to promote proliferation of human aortic endothelial cells within the vascular tissue networks. Computer-aided laser micromachining provides a unique approach to fabricate small-diameter blood vessels for bypass surgery as well as other artificial tissues with complex geometries.

  1. Water surface capturing by image processing

    Science.gov (United States)

    An alternative means of measuring the water surface interface during laboratory experiments is processing a series of sequentially captured images. Image processing can provide a continuous, non-intrusive record of the water surface profile whose accuracy is not dependent on water depth. More trad...

  2. Development of a micromachined electrostatically suspended gyroscope

    OpenAIRE

    Damrongsak, Badin

    2009-01-01

    In this thesis, a new approach based on an electrostatically suspended gyroscope (ESG) was explored in order to improve the performance of micromachined gyroscopes. Typically, a conventional micromachined gyroscope consists of a vibrating mass suspended on elastic beams that are anchored to a substrate. It measures the rotation rate of a body of interest by detecting rotation-induced Coriolis acceleration of a vibrating structure. Such a gyro is sensitive to fabrication imperfections an...

  3. Surface Modification and Surface - Subsurface Exchange Processes on Europa

    Science.gov (United States)

    Phillips, Cynthia B.; Molaro, Jamie; Hand, Kevin P.

    2017-10-01

    The surface of Jupiter’s moon Europa is modified by exogenic processes such as sputtering, gardening, radiolysis, sulfur ion implantation, and thermal processing, as well as endogenic processes including tidal shaking, mass wasting, and the effects of subsurface tectonic and perhaps cryovolcanic activity. New materials are created or deposited on the surface (radiolysis, micrometeorite impacts, sulfur ion implantation, cryovolcanic plume deposits), modified in place (thermal segregation, sintering), transported either vertically or horizontally (sputtering, gardening, mass wasting, tectonic and cryovolcanic activity), or lost from Europa completely (sputtering, plumes, larger impacts). Some of these processes vary spatially, as visible in Europa’s leading-trailing hemisphere brightness asymmetry.Endogenic geologic processes also vary spatially, depending on terrain type. The surface can be classified into general landform categories that include tectonic features (ridges, bands, cracks); disrupted “chaos-type” terrain (chaos blocks, matrix, domes, pits, spots); and impact craters (simple, complex, multi-ring). The spatial distribution of these terrain types is relatively random, with some differences in apex-antiapex cratering rates and latitudinal variation in chaos vs. tectonic features.In this work, we extrapolate surface processes and rates from the top meter of the surface in conjunction with global estimates of transport and resurfacing rates. We combine near-surface modification with an estimate of surface-subsurface (and vice versa) transport rates for various geologic terrains based on an average of proposed formation mechanisms, and a spatial distribution of each landform type over Europa’s surface area.Understanding the rates and mass balance for each of these processes, as well as their spatial and temporal variability, allows us to estimate surface - subsurface exchange rates over the average surface age (~50myr) of Europa. Quantifying the

  4. Acoustic lens for capacitive micromachined ultrasonic transducers

    Science.gov (United States)

    Chang, Chienliu; Firouzi, Kamyar; Park, Kwan Kyu; Sarioglu, Ali Fatih; Nikoozadeh, Amin; Yoon, Hyo-Seon; Vaithilingam, Srikant; Carver, Thomas; Khuri-Yakub, Butrus T.

    2014-08-01

    Capacitive micromachined ultrasonic transducers (CMUTs) have great potential to compete with traditional piezoelectric transducers in therapeutic ultrasound applications. In this paper we have designed, fabricated and developed an acoustic lens formed on the CMUT to mechanically focus ultrasound. The acoustic lens was designed based on the paraxial theory and made of silicone rubber for acoustic impedance matching and encapsulation. The CMUT was fabricated based on the local oxidation of silicon (LOCOS) and fusion-bonding. The fabricated CMUT was verified to behave like an electromechanical resonator in air and exhibited wideband response with a center frequency of 2.2 MHz in immersion. The fabrication for the acoustic lens contained two consecutive mold castings and directly formed on the surface of the CMUT. Applied with ac burst input voltages at the center frequency, the CMUT with the acoustic lens generated an output pressure of 1.89 MPa (peak-to-peak) at the focal point with an effective focal gain of 3.43 in immersion. Compared to the same CMUT without a lens, the CMUT with the acoustic lens demonstrated the ability to successfully focus ultrasound and provided a viable solution to the miniaturization of the multi-modality forward-looking endoscopes without electrical focusing.

  5. Acoustic lens for capacitive micromachined ultrasonic transducers

    International Nuclear Information System (INIS)

    Chang, Chienliu; Firouzi, Kamyar; Sarioglu, Ali Fatih; Nikoozadeh, Amin; Yoon, Hyo-Seon; Vaithilingam, Srikant; Carver, Thomas; Khuri-Yakub, Butrus T; Kyu Park, Kwan

    2014-01-01

    Capacitive micromachined ultrasonic transducers (CMUTs) have great potential to compete with traditional piezoelectric transducers in therapeutic ultrasound applications. In this paper we have designed, fabricated and developed an acoustic lens formed on the CMUT to mechanically focus ultrasound. The acoustic lens was designed based on the paraxial theory and made of silicone rubber for acoustic impedance matching and encapsulation. The CMUT was fabricated based on the local oxidation of silicon (LOCOS) and fusion-bonding. The fabricated CMUT was verified to behave like an electromechanical resonator in air and exhibited wideband response with a center frequency of 2.2 MHz in immersion. The fabrication for the acoustic lens contained two consecutive mold castings and directly formed on the surface of the CMUT. Applied with ac burst input voltages at the center frequency, the CMUT with the acoustic lens generated an output pressure of 1.89 MPa (peak-to-peak) at the focal point with an effective focal gain of 3.43 in immersion. Compared to the same CMUT without a lens, the CMUT with the acoustic lens demonstrated the ability to successfully focus ultrasound and provided a viable solution to the miniaturization of the multi-modality forward-looking endoscopes without electrical focusing. (paper)

  6. Surface Energy and Setting Process of Contacting Surfaces

    Directory of Open Access Journals (Sweden)

    M. V. Musokhranov

    2014-01-01

    Full Text Available The paper deals with a challenge in terms of ensuring an accuracy of the relative position of the conjugated surfaces that is to determine a coefficient of friction. To solve it, there is a proposal to use the surface energy, as a tool that influences the contacting parts nature. Presently, energy of the surface layers at best is only stated, but not used in practice.Analysis of the conditions of interaction between two contacting surfaces, such as seizing and setting cannot be explained only from the position of the roughness parameters. It is found that these phenomena are explained by the appearing gripe (setting bridges, which result from the energy of interaction between two or more adjacent surfaces. The emerging phenomenon such as micro welding, i.e. occurring bonds, is caused by the overflow of energy, according to the theory of physics, from the surface with a high level of energy to the surface with the smaller one to balance the system as a whole.The paper shows that through the use of process, controlling the depth of the surface layer and creating a certain structure, the energy level of the material as a whole can be specified. And this will allow us to provide the necessary performance and mechanical properties. It means to create as many gripe bridges as possible to ensure continuous positioning i.e. a fixed connection of the contacting surfaces.It was determined that to increase a value of the friction coefficient, the physical and mechanical properties of the surface layer of the parts material must be taken into account, namely, in the part body accumulate the energy to be consumed for forming the surface.The paper gives recommendations for including the parts of the surface energy in the qualitative indicators of characteristics. This will make a technologist, when routing a process, to choose such operations and modes to provide the designer-specified parameters not only of the accuracy and surface finish, but also of the

  7. Radon transport processes below the earth's surface

    International Nuclear Information System (INIS)

    Wilkening, M.

    1980-01-01

    Processes by which 222 Rn is transported from the soil to the earth's surface are reviewed. The mechanisms effective in transporting 222 Rn to the surface are related to the size and configuration of the spaces occupied by the soil gas which may vary from molecular interstices to large underground caverns. The near-surface transport processes are divided into two categories: (1) a microscopic process that includes molecular diffusion and viscous flow in fine capillaries and (2) macroscopic flow in fissures and channels. Underground air rich in 222 Rn can also reach the surface through cracks, fissures, and underground channels. This type of transport is shown for (1) a horizontal tunnel penetrating a fractured hillside, (2) a large underground cave, and (3) volcanic activity. Pressure differentials having various natural origins and thermal gradients are responsible for the transport in these examples. 222 Rn transport by ordinary molecular diffusion appears to be the dominant process

  8. Acoustic mode converters micromachined in silicon by proton beam writing

    International Nuclear Information System (INIS)

    Scholz, U.; Menzel, F.; Pluta, M.; Grill, W.; Butz, T.

    2011-01-01

    Proton beam writing is a powerful tool for the production of microstructures for acoustic applications because it allows to create structures inclined to the original sample surface which therefore can act as acoustic mode converters. We report on experiments, finding optimal structure sizes in p-type 12 Ω cm silicon for this purpose. For the creation of the structures the proton beam at the LIPSION laboratory was used. Furthermore, by investigating the micromachined silicon with a phase sensitive acoustic microscope we give evidence that inclined structures such as rods and walls can be used to change the mode of acoustic waves in the crystal.

  9. Surface transport processes in charged porous media.

    Science.gov (United States)

    Gabitto, Jorge; Tsouris, Costas

    2017-07-15

    Surface transport processes are very important in chemistry, colloidal sciences, engineering, biology, and geophysics. Natural or externally produced charges on surfaces create electrical double layers (EDLs) at the solid-liquid interface. The existence of the EDLs produces several complex processes including bulk and surface transport of ions. In this work, a model is presented to simulate bulk and transport processes in homogeneous porous media comprising big pores. It is based on a theory for capacitive charging by ideally polarizable porous electrodes without Faradaic reactions or specific adsorption of ions. A volume averaging technique is used to derive the averaged transport equations in the limit of thin electrical double layers. Description of the EDL between the electrolyte solution and the charged wall is accomplished using the Gouy-Chapman-Stern (GCS) model. The surface transport terms enter into the average equations due to the use of boundary conditions for diffuse interfaces. Two extra surface transports terms appear in the closed average equations. One is a surface diffusion term equivalent to the transport process in non-charged porous media. The second surface transport term is a migration term unique to charged porous media. The effective bulk and transport parameters for isotropic porous media are calculated solving the corresponding closure problems. Copyright © 2017 Elsevier Inc. All rights reserved.

  10. Silicon Micromachining in RF and Photonic Applications

    Science.gov (United States)

    Lin, Tsen-Hwang; Congdon, Phil; Magel, Gregory; Pang, Lily; Goldsmith, Chuck; Randall, John; Ho, Nguyen

    1995-01-01

    Texas Instruments (TI) has developed membrane and micromirror devices since the late 1970s. An eggcrate space membrane was used as the spatial light modulator in the early years. Discrete micromirrors supported by cantilever beams created a new era for micromirror devices. Torsional micromirror and flexure-beam micromirror devices were promising for mass production because of their stable supports. TI's digital torsional micromirror device is an amplitude modulator (known as the digital micromirror device (DMD) and is in production development, discussed elsewhere. We also use a torsional device for a 4 x 4 fiber-optic crossbar switch in a 2 cm x 2 cm package. The flexure-beam micromirror device is an analog phase modulator and is considered more efficient than amplitude modulators for use in optical processing systems. TI also developed millimeter-sized membranes for integrated optical switches for telecommunication and network applications. Using a member in radio frequency (RF) switch applications is a rapidly growing area because of the micromechanical device performance in microsecond-switching characteristics. Our preliminary membrane RF switch test structure results indicate promising speed and RF switching performance. TI collaborated with MIT for modeling of metal-based micromachining.

  11. Hybrid micromachining using a nanosecond pulsed laser and micro EDM

    International Nuclear Information System (INIS)

    Kim, Sanha; Chung, Do Kwan; Shin, Hong Shik; Chu, Chong Nam; Kim, Bo Hyun

    2010-01-01

    Micro electrical discharge machining (micro EDM) is a well-known precise machining process that achieves micro structures of excellent quality for any conductive material. However, the slow machining speed and high tool wear are main drawbacks of this process. Though the use of deionized water instead of kerosene as a dielectric fluid can reduce the tool wear and increase the machine speed, the material removal rate (MRR) is still low. In contrast, laser ablation using a nanosecond pulsed laser is a fast and non-wear machining process but achieves micro figures of rather low quality. Therefore, the integration of these two processes can overcome the respective disadvantages. This paper reports a hybrid process of a nanosecond pulsed laser and micro EDM for micromachining. A novel hybrid micromachining system that combines the two discrete machining processes is introduced. Then, the feasibility and characteristics of the hybrid machining process are investigated compared to conventional EDM and laser ablation. It is verified experimentally that the machining time can be effectively reduced in both EDM drilling and milling by rapid laser pre-machining prior to micro EDM. Finally, some examples of complicated 3D micro structures fabricated by the hybrid process are shown

  12. Two-dimensional capacitive micromachined ultrasonic transducer (CMUT) arrays for a miniature integrated volumetric ultrasonic imaging system

    Science.gov (United States)

    Zhuang, Xuefeng; Wygant, Ira O.; Yeh, David T.; Nikoozadeh, Amin; Oralkan, Omer; Ergun, Arif S.; Cheng, Ching-Hsiang; Huang, Yongli; Yaralioglu, Goksen G.; Khuri-Yakub, Butrus T.

    2005-04-01

    We have designed, fabricated, and characterized two-dimensional 16x16-element capacitive micromachined ultrasonic transducer (CMUT) arrays. The CMUT array elements have a 250-μm pitch, and when tested in immersion, have a 5 MHz center frequency and 99% fractional bandwidth. The fabrication process is based on standard silicon micromachining techniques and therefore has the advantages of high yield, low cost, and ease of integration. The transducers have a Si3N4 membrane and are fabricated on a 400-μm thick silicon substrate. A low parasitic capacitance through-wafer via connects each CMUT element to a flip-chip bond pad on the back side of the wafer. Each through wafer via is 20 μm in diameter and 400 μm deep. The interconnects form metal-insulator-semiconductor (MIS) junctions with the surrounding high-resistivity silicon substrate to establish isolation and to reduce parasitic capacitance. Each through-wafer via has less than 0.06 pF of parasitic capacitance. We have investigated a Au-In flip-chip bonding process to connect the 2D CMUT array to a custom integrated circuit (IC) with transmit and receive electronics. To develop this process, we fabricated fanout structures on silicon, and flip-chip bonded these test dies to a flat surface coated with gold. The average series resistance per bump is about 3 Ohms, and 100% yield is obtained for a total of 30 bumps.

  13. Surface quality in rapid prototype MMD process

    Directory of Open Access Journals (Sweden)

    Lisandro Vargas Henríquez

    2004-09-01

    Full Text Available This article summarises a Manufacturing Materials and Processes MSc thesis written for the Mechanical and Electrical Engineering Department. The paper shows the interaction of process, gap (deposition distance and extursion terminal velocity modelled process parameters for CEIF's (Centro de Equipos Interfacultades rapid prototype molten material deposit (MMD Titan SH-1 machine by analysing prototupes improved surface quality and resistence to tension and characterising material. The project applies experimental design criteria for orientating the selection of experimental process parameters. Acrylonitrile-buttadin-styrene (ABS had alredy been mechanically and physicochemically characterised (i.e the material used in the MMD process.

  14. Micromachined gyroscopes: challenges, design solutions, and opportunities

    Science.gov (United States)

    Shkel, Andrei M.

    2001-08-01

    Micromachined gyroscopes are probably the most challenging type of transducers ever attempted to be designed in micro-world. A nail-size dynamic system integrated with control electronics on the same silicon chip is designed to be a very sensitive sensor which is potentially able to detect maneuvers and motions beyond human perception. Along with exciting opportunities which MEMS gyroscopes could bring to everyday life, the miniaturization introduces many new technical challenges. Multi-degree of freedom dynamics, sensitivity to fabrication imperfections, dynamic instability, limited control resources - all these raise a number of fundamentally challenging issues in the design, analysis, and control of micromachined gyroscopes. In this paper, we summarize principles of operation, review recent research and development efforts, and discuss potential applications and the future market of silicon based micromachined gyroscopes.

  15. Capacitive micromachined ultrasonic transducers with through-wafer interconnects

    Science.gov (United States)

    Zhuang, Xuefeng

    Capacitive micromachined ultrasonic transducer (CMUT) is a promising candidate for making ultrasound transducer arrays for applications such as 3D medical ultrasound, non-destructive evaluation and chemical sensing. Advantages of CMUTs over traditional piezoelectric transducers include low-cost batch fabrication, wide bandwidth, and ability to fabricate arrays with broad operation frequency range and different geometric configurations on a single wafer. When incorporated with through-wafer interconnects, a CMUT array can be directly integrated with a front-end integrated circuit (IC) to achieve compact packaging and to mitigate the effects of the parasitic capacitance from the connection cables. Through-wafer via is the existing interconnect scheme for CMUT arrays, and many other types of micro-electro-mechanical system (MEMS) devices. However, to date, no successful through-wafer via fabrication technique compatible with the wafer-bonding method of making CMUT arrays has been demonstrated. The through-wafer via fabrication steps degrade the surface conditions of the wafer, reduce the radius of curvature, thus making it difficult to bond. This work focuses on new through-wafer interconnect techniques that are compatible with common MEMS fabrication techniques, including both surface-micromachining and direct wafer-to-wafer fusion bonding. In this dissertation, first, a through-wafer via interconnect technique with improved characteristics is presented. Then, two implementations of through-wafer trench isolation are demonstrated. The through-wafer trench methods differ from the through-wafer vias in that the electrical conduction is through the bulk silicon instead of the conductor in the vias. In the first implementation, a carrier wafer is used to provide mechanical support; in the second, mechanical support is provided by a silicon frame structure embedded inside the isolation trenches. Both implementations reduce fabrication complexity compared to the through

  16. THE PRODUCT DESIGN PROCESS USING STYLISTIC SURFACES

    Directory of Open Access Journals (Sweden)

    Arkadiusz Gita

    2017-06-01

    Full Text Available The increasing consumer requirements for the way what everyday use products look like, forces manufacturers to put more emphasis on product design. Constructors, apart from the functional aspects of the parts created, are forced to pay attention to the aesthetic aspects. Software for designing A-class surfaces is very helpful in this case. Extensive quality analysis modules facilitate the work and allow getting models with specific visual features. The authors present a design process of the product using stylistic surfaces based on the front panel of the moped casing. In addition, methods of analysis of the design surface and product technology are presented.

  17. Fabrication and Characterization of Capacitive Micromachined Ultrasonic Transducers with Low-Temperature Wafer Direct Bonding

    Directory of Open Access Journals (Sweden)

    Xiaoqing Wang

    2016-12-01

    Full Text Available This paper presents a fabrication method of capacitive micromachined ultrasonic transducers (CMUTs by wafer direct bonding, which utilizes both the wet chemical and O2plasma activation processes to decrease the bonding temperature to 400 °C. Two key surface properties, the contact angle and surface roughness, are studied in relation to the activation processes, respectively. By optimizing the surface activation parameters, a surface roughness of 0.274 nm and a contact angle of 0° are achieved. The infrared images and static deflection of devices are assessed to prove the good bonding effect. CMUTs having silicon membranes with a radius of 60 μm and a thickness of 2 μm are fabricated. Device properties have been characterized by electrical and acoustic measurements to verify their functionality and thus to validate this low-temperature process. A resonant frequency of 2.06 MHz is obtained by the frequency response measurements. The electrical insertion loss and acoustic signal have been evaluated. This study demonstrates that the CMUT devices can be fabricated by low-temperature wafer direct bonding, which makes it possible to integrate them directly on top of integrated circuit (IC substrates.

  18. Photothermal self-excitation of the micromachined resonators

    Science.gov (United States)

    Churenkov, Alexander V.; Kozel, Stanislav M.; Listvin, Vladimir N.

    1990-07-01

    Recently interest has grown to the physical quantities fibre-optic sensors in which a micromachined resonator acts as a sensitive element. This resonator can change the resonant frequency when acted upon by an outside force. Energy supply necessary for the resonator excitation and transfer of information about the outer action are accomplished by optical fibres, that can be present in the zone of a higher aggressiveness, strong electromagnetic interferences atc. The frequency output of such sensors is easily processed by digital systems and is insensitive to signal level.

  19. Micromachined glass chips for ion analysis

    NARCIS (Netherlands)

    Gardeniers, Johannes G.E.; Mulder, Micha; Lüttge, Regina; van den Berg, Albert

    2002-01-01

    This article describes recent developments at Micronit Microfluidics B.V. and MESA+ in the field of "Lab-on-a-chip" systems for ion analysis. Glass chips with typical micromachined channel geometries for capillary electrophoresis and integrated conductivity detection were developed, with which

  20. Surface-Assisted Dynamic Search Processes.

    Science.gov (United States)

    Shin, Jaeoh; Kolomeisky, Anatoly B

    2018-03-01

    Many chemical and biological systems exhibit intermittent search phenomena when participating particles alternate between dynamic regimes with different dimensionalities. Here we investigate theoretically a dynamic search process of finding a small target on a two-dimensional surface starting from a bulk solution, which is an example of such an intermittent search process. Both continuum and discrete-state stochastic descriptions are developed. It is found that depending on the scanning length λ, which describes the area visited by the reacting molecule during one search cycle, the system can exhibit three different search regimes: (i) For small λ values, the reactant finds the target mostly via three-dimensional bulk diffusion; (ii) for large λ values, the reactant molecule associates to the target mostly via surface diffusion; and (iii) for intermediate λ values, the reactant reaches the target via a combination of three-dimensional and two-dimensional search cycles. Our analysis also shows that the mean search times have different scalings as a function of the size of the surface segment depending on the nature of the dynamic search regime. Search dynamics are also sensitive to the position of the target for large scanning lengths. In addition, it is argued that the continuum description underestimates mean search times and does not always correctly describe the most optimal conditions for the surface-assisted dynamic processes. The importance of our findings for real natural systems is discussed.

  1. Silicon bulk micromachined hybrid dimensional artifact.

    Energy Technology Data Exchange (ETDEWEB)

    Claudet, Andre A.; Tran, Hy D.; Bauer, Todd Marks; Shilling, Katherine Meghan; Oliver, Andrew David

    2010-03-01

    A mesoscale dimensional artifact based on silicon bulk micromachining fabrication has been developed and manufactured with the intention of evaluating the artifact both on a high precision coordinate measuring machine (CMM) and video-probe based measuring systems. This hybrid artifact has features that can be located by both a touch probe and a video probe system with a k=2 uncertainty of 0.4 {micro}m, more than twice as good as a glass reference artifact. We also present evidence that this uncertainty could be lowered to as little as 50 nm (k=2). While video-probe based systems are commonly used to inspect mesoscale mechanical components, a video-probe system's certified accuracy is generally much worse than its repeatability. To solve this problem, an artifact has been developed which can be calibrated using a commercially available high-accuracy tactile system and then be used to calibrate typical production vision-based measurement systems. This allows for error mapping to a higher degree of accuracy than is possible with a glass reference artifact. Details of the designed features and manufacturing process of the hybrid dimensional artifact are given and a comparison of the designed features to the measured features of the manufactured artifact is presented and discussed. Measurement results from vision and touch probe systems are compared and evaluated to determine the capability of the manufactured artifact to serve as a calibration tool for video-probe systems. An uncertainty analysis for calibration of the artifact using a CMM is presented.

  2. Batch fabrication of scanning microscopy probes for thermal and magnetic imaging using standard micromachining

    NARCIS (Netherlands)

    Sarajlic, Edin; Vermeer, Rolf; Delalande, M.Y.; Siekman, Martin Herman; Huijink, R.; Fujita, H.; Abelmann, Leon

    2010-01-01

    We present a process for batch fabrication of a novel scanning microscopy probe for thermal and magnetic imaging using standard micromachining and conventional optical contact lithography. The probe features an AFM-type cantilever with a sharp pyramidal tip composed of four freestanding silicon

  3. Array processing for seismic surface waves

    International Nuclear Information System (INIS)

    Marano, S.

    2013-01-01

    This dissertation submitted to the Swiss Federal Institute of Technology ETH in Zurich takes a look at the analysis of surface wave properties which allows geophysicists to gain insight into the structure of the subsoil, thus avoiding more expensive invasive techniques such as borehole drilling. This thesis aims at improving signal processing techniques for the analysis of surface waves in various directions. One main contribution of this work is the development of a method for the analysis of seismic surface waves. The method also deals with the simultaneous presence of multiple waves. Several computational approaches to minimize costs are presented and compared. Finally, numerical experiments that verify the effectiveness of the proposed cost function and resulting array geometry designs are presented. These lead to greatly improved estimation performance in comparison to arbitrary array geometries

  4. Influence of micromachined targets on laser accelerated proton beam profiles

    Science.gov (United States)

    Dalui, Malay; Permogorov, Alexander; Pahl, Hannes; Persson, Anders; Wahlström, Claes-Göran

    2018-03-01

    High intensity laser-driven proton acceleration from micromachined targets is studied experimentally in the target-normal-sheath-acceleration regime. Conical pits are created on the front surface of flat aluminium foils of initial thickness 12.5 and 3 μm using series of low energy pulses (0.5–2.5 μJ). Proton acceleration from such micromachined targets is compared with flat foils of equivalent thickness at a laser intensity of 7 × 1019 W cm‑2. The maximum proton energy obtained from targets machined from 12.5 μm thick foils is found to be slightly lower than that of flat foils of equivalent remaining thickness, and the angular divergence of the proton beam is observed to increase as the depth of the pit approaches the foil thickness. Targets machined from 3 μm thick foils, on the other hand, show evidence of increasing the maximum proton energy when the depths of the structures are small. Furthermore, shallow pits on 3 μm thick foils are found to be efficient in reducing the proton beam divergence by a factor of up to three compared to that obtained from flat foils, while maintaining the maximum proton energy.

  5. ENVISAT Land Surface Processes. Phase 2

    Science.gov (United States)

    vandenHurk, B. J. J. M.; Su, Z.; Verhoef, W.; Menenti, M.; Li, Z.-L.; Wan, Z.; Moene, A. F.; Roerink, G.; Jia, I.

    2002-01-01

    This is a progress report of the 2nd phase of the project ENVISAT- Land Surface Processes, which has a 3-year scope. In this project, preparative research is carried out aiming at the retrieval of land surface characteristics from the ENVISAT sensors MERIS and AATSR, for assimilation into a system for Numerical Weather Prediction (NWP). Where in the 1st phase a number of first shot experiments were carried out (aiming at gaining experience with the retrievals and data assimilation procedures), the current 2nd phase has put more emphasis on the assessment and improvement of the quality of the retrieved products. The forthcoming phase will be devoted mainly to the data assimilation experiments and the assessment of the added value of the future ENVISAT products for NWP forecast skill. Referring to the retrieval of albedo, leaf area index and atmospheric corrections, preliminary radiative transfer calculations have been carried out that should enable the retrieval of these parameters once AATSR and MERIS data become available. However, much of this work is still to be carried out. An essential part of work in this area is the design and implementation of software that enables an efficient use of MODTRAN(sub 4) radiative transfer code, and during the current project phase familiarization with these new components has been achieved. Significant progress has been made with the retrieval of component temperatures from directional ATSR-images, and the calculation of surface turbulent heat fluxes from these data. The impact of vegetation cover on the retrieved component temperatures appears manageable, and preliminary comparison of foliage temperature to air temperatures were encouraging. The calculation of surface fluxes using the SEBI concept,which includes a detailed model of the surface roughness ratio, appeared to give results that were in reasonable agreement with local measurements with scintillometer devices. The specification of the atmospheric boundary conditions

  6. Separation and Detection of Toxic Gases with a Silicon Micromachined Gas Chromatography System

    Science.gov (United States)

    Kolesar, Edward S.; Reston, Rocky R.

    1995-01-01

    A miniature gas chromatography (GC) system was designed and fabricated using silicon micromachining and integrated circuit (IC) processing techniques. The silicon micromachined gas chromatography system (SMGCS) is composed of a miniature sample injector that incorporates a 10 microliter sample loop; a 0.9 meter long, rectangular shaped (300 micrometer width and 10 micrometer height) capillary column coated with a 0.2 micrometer thick copper phthalocyanine (CuPc) stationary phase; and a dual detector scheme based upon a CuPc-coated chemiresistor and a commercially available 125 micrometer diameter thermal conductivity detector (TCD) bead. Silicon micromachining was employed to fabricate the interface between the sample injector and the GC column, the column itself, and the dual detector cavity. A novel IC thin-film processing technique was developed to sublime the CuPc stationary phase coating on the column walls that were micromachined in the host silicon wafer substrate and Pyrex (r) cover plate, which were then electrostatically bonded together. The SMGCS can separate binary gas mixtures composed of parts-per-million (ppm) concentrations of ammonia (NH3) and nitrogen dioxide (NO2) when isothermally operated (55-80 degrees C). With a helium carrier gas and nitrogen diluent, a 10 microliter sample volume containing ammonia and nitrogen dioxide injected at 40 psi ((2.8 x 10(exp 5)Pa)) can be separated in less than 30 minutes.

  7. Parametric studies on the nanosecond laser micromachining of the materials

    Science.gov (United States)

    Tański, M.; Mizeraczyk, J.

    2016-12-01

    In this paper the results of an experimental studies on nanosecond laser micromachining of selected materials are presented. Tested materials were thin plates made of aluminium, silicon, stainless steel (AISI 304) and copper. Micromachining of those materials was carried out using a solid state laser with second harmonic generation λ = 532 nm and a pulse width of τ = 45 ns. The effect of laser drilling using single laser pulse and a burst of laser pulses, as well as laser cutting was studied. The influence of laser fluence on the diameter and morphology of a post ablation holes drilled with a single laser pulse was investigated. The ablation fluence threshold (Fth) of tested materials was experimentally determined. Also the drilling rate (average depth per single laser pulse) of holes drilled with a burst of laser pulses was determined for all tested materials. The studies of laser cutting process revealed that a groove depth increases with increasing average laser power and decreasing cutting speed. It was also found that depth of the laser cut grooves is a linear function of number of repetition of a cut. The quantitative influence of those parameters on the groove depth was investigated.

  8. The surface of Mars: Morphology and process

    Science.gov (United States)

    Aharonson, Oded

    The goal of this work is a quantitative description of the morphology of the surface of Mars, in order to constrain the nature of processes acting during the ancient past through today. Emphasis is placed on linking geometric properties to physical mechanisms. Surface smoothness on Mars is distinctive in the vast northern hemisphere plains. Amazonis Planitia is remarkable in its smoothness, exhibiting an rms variation in topography of building tectonics and volcanics. The shallower long-wavelength portion of the lowlands' topographic power spectrum relative to the highlands' can be accounted for by a simple model of sedimentation such as might be expected at an ocean's floor, but the addition of another process such as cratering is necessary to explain the spectral slope in short wavelengths. Large drainage systems on Mars have geomorphic characteristics that are inconsistent with prolonged erosion by surface runoff. We find the topography has not evolved to an expected equilibrium terrain form, even in areas where runoff incision has been previously interpreted. We demonstrate that features known as slope streaks form exclusively in regions of low thermal inertia, steep slopes, and incredibly, only where daily peak temperatures exceed 275 K during the martian year. The results suggest that at least small amounts of water may be currently present and undergo phase transitions. We detect subtle changes of the polar surface height during the course of seasonal cycles. Using altimetric crossover residuals, we show that while zonally averaged data captures the global behavior of CO 2 exchange, there is a strong dependence of the pattern on longitude. Decomposition of the signal into harmonics in time shows the amplitudes are correlated with the polar cap deposits. (Copies available exclusively from MIT Libraries, Rm. 14-0551, Cambridge, MA 02139-4307. Ph. 617-253-5668; Fax 617-253-1690.)

  9. Model Design of Piezoelectric Micromachined Modal Gyroscope

    Directory of Open Access Journals (Sweden)

    Xiaojun Hu

    2011-01-01

    Full Text Available This paper reports a novel kind of solid-state microgyroscope, which is called piezoelectric micromachined modal gyroscope (PMMG. PMMG has large stiffness and robust resistance to shake and strike because there is no evident mass-spring component in its structure. This work focused on quantitative optimization of the gyroscope, which is still blank for such gyroscope. The modal analysis by the finite element method (FEM was firstly conducted. A set of quantitative indicators were developed to optimize the operation mode. By FEM, the harmonic analysis was conducted to find the way to efficiently actuate the operational mode needed. The optimal configuration of driving electrodes was obtained. At last, the Coriolis analysis was conducted to show the relation between angular velocity and differential output voltage by the Coriolis force under working condition. The results obtained in this paper provide theoretical basis for realizing this novel kind of micromachined gyroscope.

  10. Micromachined Parts Advance Medicine, Astrophysics, and More

    Science.gov (United States)

    2015-01-01

    In the mid-1990s, Marshall Space Flight Center awarded two SBIR contracts to Potomac Photonics, now based in Baltimore, for the development of computerized workstations capable of mass-producing tiny, intricate, diffractive optical elements. While the company has since discontinued the workstations, those contracts set the stage for Potomac Photonics to be a leader in the micromachining industry, where NASA remains one of its clients.

  11. Micromachined Piezoelectric Actuators for Cryogenic Adaptive Optics, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — TRS Technologies proposes micromachined single crystal piezoelectric actuator arrays to enable ultra-large stroke, high precision shape control for large aperture,...

  12. In-pipe micromachine locomotion via the inertial stepping principle

    Energy Technology Data Exchange (ETDEWEB)

    Yum, Young Jin [University of Ulsan, Ulsan (Korea, Republic of); Hwang, Han Sub [Suweon Science College, Suweon (Korea, Republic of); Kelemen, Michal; Maxim, Vladislav; Frankovsky, Peter [Technical University of Kosice, Kosice (Slovakia)

    2014-08-15

    This paper discusses an in-pipe inspection micromachine intended for locomotion inside a small diameter pipe. The micromachine locomotion is based on the inertial stepping principle, which utilizes the drive force of the two-body impact. The in-pipe micromachine contacts the pipe through the elastic bristles installed on the in-pipe machine and in two lines and crossways with respect to the micromachine axle. The paper describes the principle of locomotion and the dynamics by which the unknown of both the parameters and the relations are experimentally identified. Based on the results, a simulation model was created, and the results of the simulations were compared with experimental results.

  13. Sub-band-gap laser micromachining of lithium niobate

    DEFF Research Database (Denmark)

    Christensen, F. K.; Müllenborn, Matthias

    1995-01-01

    Laser processing of insulators and semiconductors is usually realized using photon energies exceeding the band-gap energy. This makes laser processing of insulators difficult since high photon energies typically require either a pulsed laser or a frequency-doubled continuous-wave laser. A new...... method is reported which enables us to do laser processing of lithium niobate using sub-band-gap photons. Using high scan speeds, moderate power densities, and sub-band-gap photon energies results in volume removal rates in excess of 106µm3/s. This enables fast micromachining of small piezoelectric...... structures, or simple etching of grooves for precision positioning of optical fibers. ©1995 American Institute of Physics....

  14. Study of surfactant-added TMAH for applications in DRIE and wet etching-based micromachining

    Science.gov (United States)

    Tang, B.; Shikida, M.; Sato, K.; Pal, P.; Amakawa, H.; Hida, H.; Fukuzawa, K.

    2010-06-01

    In this paper, etching anisotropy is evaluated for a number of different crystallographic orientations of silicon in a 0.1 vol% Triton-X-100 added 25 wt% tetramethylammonium hydroxide (TMAH) solution using a silicon hemisphere. The research is primarily aimed at developing advanced applications of wet etching in microelectromechanical systems (MEMS). The etching process is carried out at different temperatures in the range of 61-81 °C. The etching results of silicon hemisphere and different shapes of three-dimensional structures in {1 0 0}- and {1 1 0}-Si surfaces are analyzed. Significantly important anisotropy, different from a traditional etchant (e.g. pure KOH and TMAH), is investigated to extend the applications of the wet etching process in silicon bulk micromachining. The similar etching behavior of exact and vicinal {1 1 0} and {1 1 1} planes in TMAH + Triton is utilized selectively to remove the scalloping from deep reactive-ion etching (DRIE) etched profiles. The direct application of the present research is demonstrated by fabricating a cylindrical lens with highly smooth etched surface finish. The smoothness of a micro-lens at different locations is measured qualitatively by a scanning electron microscope and quantitatively by an atomic force microscope. The present paper provides a simple and effective fabrication method of the silicon micro-lens for optical MEMS applications.

  15. Solid polymer electrolyte composite membrane comprising laser micromachined porous support

    Science.gov (United States)

    Liu, Han [Waltham, MA; LaConti, Anthony B [Lynnfield, MA; Mittelsteadt, Cortney K [Natick, MA; McCallum, Thomas J [Ashland, MA

    2011-01-11

    A solid polymer electrolyte composite membrane and method of manufacturing the same. According to one embodiment, the composite membrane comprises a rigid, non-electrically-conducting support, the support preferably being a sheet of polyimide having a thickness of about 7.5 to 15 microns. The support has a plurality of cylindrical pores extending perpendicularly between opposing top and bottom surfaces of the support. The pores, which preferably have a diameter of about 5 microns, are made by laser micromachining and preferably are arranged in a defined pattern, for example, with fewer pores located in areas of high membrane stress and more pores located in areas of low membrane stress. The pores are filled with a first solid polymer electrolyte, such as a perfluorosulfonic acid (PFSA) polymer. A second solid polymer electrolyte, which may be the same as or different than the first solid polymer electrolyte, may be deposited over the top and/or bottom of the first solid polymer electrolyte.

  16. Resonant gravimetric immuno sensing based on capacitive micromachined ultrasound transducers

    International Nuclear Information System (INIS)

    Virzonis, Darius; Gailius Vanagas; Dovydas Barauskas; Ramanaviciene, Almira; Makaraviciute, Asta; Ramanavicius, Arunas; Wen, Weijia; Kodzius, Rimantas

    2014-01-01

    High-frequency (40 MHz) and low-frequency (7 MHz) capacitive micromachined ultrasound transducers (CMUT) were fabricated and tested for use in gravimetric detection of biomolecules. The low-frequency CMUT sensors have a gold-coated surface, while the high-frequency sensors have a silicon nitride surface. Both surfaces were functionalized with bovine leukemia virus antigen gp51 acting as the antigen. On addition of an a specific antibody labeled with horseradish peroxidase (HRP), the antigen/antibody complex is formed on the surface and quantified by HRP-catalyzed oxidation of tetramethylbenzidine. It has been found that a considerably smaller quantity of immuno complex is formed on the high frequency sensor surface. In parallel, the loading of the surface of the CMUT was determined via resonance frequency and electromechanical resistance readings. Following the formation of the immuno complexes, the resonance frequencies of the low-frequency and high-frequency sensors decrease by up to 420 and 440 kHz, respectively. Finite element analysis reveals that the loading of the (gold-coated) low frequency sensors is several times larger than that on high frequency sensors. The formation of the protein film with pronounced elasticity and stress on the gold surface case is discussed. We also discuss the adoption of this method for the detection of DNA using a hybridization assay following polymerase chain reaction. (author)

  17. Resonant gravimetric immunosensing based on capacitive micromachined ultrasound transducers

    KAUST Repository

    Viržonis, Darius

    2014-04-08

    High-frequency (40 MHz) and low-frequency (7 MHz) capacitive micromachined ultrasound transducers (CMUT) were fabricated and tested for use in gravimetric detection of biomolecules. The low-frequency CMUT sensors have a gold-coated surface, while the high-frequency sensors have a silicon nitride surface. Both surfaces were functionalized with bovine leukemia virus antigen gp51 acting as the antigen. On addition of an a specific antibody labeled with horseradish peroxidase (HRP), the antigen/antibody complex is formed on the surface and quantified by HRP-catalyzed oxidation of tetramethylbenzidine. It has been found that a considerably smaller quantity of immuno complex is formed on the high frequency sensor surface. In parallel, the loading of the surface of the CMUT was determined via resonance frequency and electromechanical resistance readings. Following the formation of the immuno complexes, the resonance frequencies of the low-frequency and high-frequency sensors decrease by up to 420 and 440 kHz, respectively. Finite element analysis reveals that the loading of the (gold-coated) low frequency sensors is several times larger than that on high frequency sensors. The formation of the protein film with pronounced elasticity and stress on the gold surface case is discussed. We also discuss the adoption of this method for the detection of DNA using a hybridization assay following polymerase chain reaction.

  18. Compact Micromachined Infrared Bandpass Filters for Planetary Spectroscopy

    Science.gov (United States)

    Merrell, Willie C., II; Aslam, Shahid; Brown, Ari D.; Chervenak, James A.; Huang, Wei-Chung; Quijada, Manuel; Wollack, Edward

    2011-01-01

    The future needs of space based observational planetary and astronomy missions include low mass and small volume radiometric instruments that can operate in high radiation and low temperature environments. Here we focus on a central spectroscopic component, the bandpass filter. We model the bandpass response of the filters to target the wavelength of the resonance peaks at 20, 40, and 60 micrometers and report good agreement between the modeled and measured response. We present a technique of using common micromachining processes for semiconductor fabrication to make compact, free standing resonant metal mesh filter arrays with silicon support frames. The process can accommodate multiple detector array architectures and the silicon frame provides lightweight mechanical support with low form factor. We also present a conceptual hybridization of the filters with a detector array.

  19. Micromachined high-performance RF passives in CMOS substrate

    International Nuclear Information System (INIS)

    Li, Xinxin; Ni, Zao; Gu, Lei; Wu, Zhengzheng; Yang, Chen

    2016-01-01

    This review systematically addresses the micromachining technologies used for the fabrication of high-performance radio-frequency (RF) passives that can be integrated into low-cost complementary metal-oxide semiconductor (CMOS)-grade (i.e. low-resistivity) silicon wafers. With the development of various kinds of post-CMOS-compatible microelectromechanical systems (MEMS) processes, 3D structural inductors/transformers, variable capacitors, tunable resonators and band-pass/low-pass filters can be compatibly integrated into active integrated circuits to form monolithic RF system-on-chips. By using MEMS processes, including substrate modifying/suspending and LIGA-like metal electroplating, both the highly lossy substrate effect and the resistive loss can be largely eliminated and depressed, thereby meeting the high-performance requirements of telecommunication applications. (topical review)

  20. Capacitive micromachined ultrasonic transducers for medical imaging and therapy

    Science.gov (United States)

    Khuri-Yakub, Butrus T.; Oralkan, Ömer

    2011-05-01

    Capacitive micromachined ultrasonic transducers (CMUTs) have been subject to extensive research for the last two decades. Although they were initially developed for air-coupled applications, today their main application space is medical imaging and therapy. This paper first presents a brief description of CMUTs, their basic structure and operating principles. Our progression of developing several generations of fabrication processes is discussed with an emphasis on the advantages and disadvantages of each process. Monolithic and hybrid approaches for integrating CMUTs with supporting integrated circuits are surveyed. Several prototype transducer arrays with integrated front-end electronic circuits we developed and their use for 2D and 3D, anatomical and functional imaging, and ablative therapies are described. The presented results prove the CMUT as a micro-electro-mechanical systems technology for many medical diagnostic and therapeutic applications.

  1. Capacitive micromachined ultrasonic transducers for medical imaging and therapy

    International Nuclear Information System (INIS)

    Khuri-Yakub, Butrus T; Oralkan, Ömer

    2011-01-01

    Capacitive micromachined ultrasonic transducers (CMUTs) have been subject to extensive research for the last two decades. Although they were initially developed for air-coupled applications, today their main application space is medical imaging and therapy. This paper first presents a brief description of CMUTs, their basic structure and operating principles. Our progression of developing several generations of fabrication processes is discussed with an emphasis on the advantages and disadvantages of each process. Monolithic and hybrid approaches for integrating CMUTs with supporting integrated circuits are surveyed. Several prototype transducer arrays with integrated front-end electronic circuits we developed and their use for 2D and 3D, anatomical and functional imaging, and ablative therapies are described. The presented results prove the CMUT as a micro-electro-mechanical systems technology for many medical diagnostic and therapeutic applications

  2. Modeling and analysis of micro-WEDM process of titanium alloy (Ti–6Al–4V using response surface approach

    Directory of Open Access Journals (Sweden)

    P. Sivaprakasam

    2014-12-01

    Full Text Available Micro-machining technology is effectively used in modern manufacturing industries. This paper investigates the influence of three different input parameters such as voltage, capacitance and feed rate of micro-wire electrical discharge machining (micro-WEDM performances of material removal rate (MRR, Kerf width (KW and surface roughness (SR using response surface methodology with central composite design (CCD. The experiments are carried out on titanium alloy (Ti–6Al–4V. The machining characteristics are significantly influenced by the electrical and non-electrical parameters in micro-WEDM process. Analysis of variance (ANOVA was performed to find out the significant influence of each factor. The model developed can use a genetic algorithm (GA to determine the optimal machining conditions using multi-objective optimization technique. The optimal machining performance of material removal rate, Kerf width and surface roughness are 0.01802 mm3/min, 101.5 μm and 0.789 μm, respectively, using this optimal machining conditions viz. voltage 100 V, capacitance 10 nF and feed rate 15 μm/s.

  3. Impact of Urban Surfaces on Precipitation Processes

    Science.gov (United States)

    Shepherd, J. M.

    2004-01-01

    The Intergovernmental Panel on Climate Change (IPCC) was established in 1988 by two United Nations organizations, the World Meteorological Organization (WMO) and the United Nations Environment Programme (UNEP) to assess the "risk of human-induced climate change". Such reports are used by decision-makers around the world to assess how our climate is changing. Its reports are widely respected and cited and have been highly influential in forming national and international responses to climate change. The Fourth Assessment report includes a section on the effects of surface processes on climate. This sub-chapter provides an overview of recent developments related to the impact of cities on rainfall. It highlights the possible mechanisms that buildings, urban heat islands, urban aerosols or pollution, and other human factors in cities that can affect rainfall.

  4. Laser direct micro-machining with top-hat-converted single mode lasers

    Science.gov (United States)

    Homburg, O.; Toennissen, F.; Mitra, T.; Lissotschenko, V.

    2008-02-01

    Laser direct micro-machining processes are used in a variety of industries like inkjet printing, semiconductor processing, solar technology, flat-panel display production and medicine. Various kinds of materials, e.g. ceramics, metals, isolators, oxides, organics and semiconductors are being structured. In most cases pulsed single mode solid state lasers with an inhomogeneous Gaussian beam profile are employed, like YAG lasers and their harmonics. However, the quality and functionality of the generated structures and micro-systems as well as the speed of the process can be improved by the utilization of homogeneous top hat profiles. The beam shaping principle of refractive Gaussian-to-top-hat converters is shown. Compact beam shaper modules based on this principle have been developed - supporting most direct laser micro-machining applications. The resulting process advantages are demonstrated by selected application results, namely the drilling of holes and patterning of trenches for different kinds of materials.

  5. Microfabrication in free-standing gallium nitride using UV laser micromachining

    International Nuclear Information System (INIS)

    Gu, E.; Howard, H.; Conneely, A.; O'Connor, G.M.; Illy, E.K.; Knowles, M.R.H.; Edwards, P.R.; Martin, R.W.; Watson, I.M.; Dawson, M.D.

    2006-01-01

    Gallium nitride (GaN) and related alloys are important semiconductor materials for fabricating novel photonic devices such as ultraviolet (UV) light-emitting diodes (LEDs) and vertical cavity surface-emitting lasers (VCSELs). Recent technical advances have made free-standing GaN substrates available and affordable. However, these materials are strongly resistant to wet chemical etching and also, low etch rates restrict the use of dry etching. Thus, to develop alternative high-resolution processing for these materials is increasingly important. In this paper, we report the fabrication of microstructures in free-standing GaN using pulsed UV lasers. An effective method was first developed to remove the re-deposited materials due to the laser machining. In order to achieve controllable machining and high resolution in GaN, machining parameters were carefully optimised. Under the optimised conditions, precision features such as holes (through holes, blind or tapered holes) on a tens of micrometer length scale have been machined. To fabricate micro-trenches in GaN with vertical sidewalls and a flat bottom, different process strategies of laser machining were tested and optimised. Using this technique, we have successfully fabricated high-quality micro-trenches in free-standing GaN with various widths and depths. The approach combining UV laser micromachining and other processes is also discussed. Our results demonstrate that the pulsed UV laser is a powerful tool for fabricating precision microstructures and devices in gallium nitride

  6. Numerical modelling of micro-machining of f.c.c. single crystal: Influence of strain gradients

    KAUST Repository

    Demiral, Murat

    2014-11-01

    A micro-machining process becomes increasingly important with the continuous miniaturization of components used in various fields from military to civilian applications. To characterise underlying micromechanics, a 3D finite-element model of orthogonal micro-machining of f.c.c. single crystal copper was developed. The model was implemented in a commercial software ABAQUS/Explicit employing a user-defined subroutine VUMAT. Strain-gradient crystal-plasticity and conventional crystal-plasticity theories were used to demonstrate the influence of pre-existing and evolved strain gradients on the cutting process for different combinations of crystal orientations and cutting directions. Crown Copyright © 2014.

  7. Uncovering deformation processes from surface displacements

    Science.gov (United States)

    Stramondo, Salvatore

    2013-04-01

    The aim of this talk is to provide an overview about the most recent outcomes in Earth Sciences, describe the role of satellite remote sensing, together with GPS, ground measurement and further data, for geophysical parameter retrieval in well known case studies where the combined approach dealing with the use of two or more techniques/datasets have demonstrated their effectiveness. The Earth Sciences have today a wide availability of instruments and sensors able to provide scientists with an unprecedented capability to study the physical processes driving earthquakes, volcanic eruptions, landslides, and other dynamic Earth systems. Indeed measurements from satellites allow systematic observation of the Earth surface covering large areas, over a long time period and characterized by growing sample intervals. Interferometric Synthetic Aperture Radar (InSAR) technique has demonstrated its effectiveness to investigate processes responsible for crustal faulting stemming from the detection of surface deformation patterns. Indeed using satellite data along ascending and descending orbits, as well as different incident angles, it is possible in principle to retrieve the full 3D character of the ground motion. To such aim the use of GPS stations providing 3D displacement components is a reliable complementary instrument. Finally, offset tracking techniques and Multiple Aperture Interferometry (MAI) may provide a contribution to the analysis of horizontal and NS deformation vectors. The estimation of geophysical parameters using InSAR has been widely discussed in seismology and volcanology, and also applied to deformation associated with groundwater and other subsurface fluids. These applications often involve the solution of an inverse problem, which means the retrieval of optimal source parameters at depth for volcanoes and earthquakes, from the knowledge of surface deformation from InSAR. In recent years, InSAR measurements combined with traditional seismological and

  8. Research on the effect of coverage rate on the surface quality in laser direct writing process

    Science.gov (United States)

    Pan, Xuetao; Tu, Dawei

    2017-07-01

    Direct writing technique is usually used in femtosecond laser two-photon micromachining. The size of the scanning step is an important factor affecting the surface quality and machining efficiency of micro devices. According to the mechanism of two-photon polymerization, combining the distribution function of light intensity and the free radical concentration theory, we establish the mathematical model of coverage of solidification unit, then analyze the effect of coverage on the machining quality and efficiency. Using the principle of exposure equivalence, we also obtained the analytic expressions of the relationship among the surface quality characteristic parameters of microdevices and the scanning step, and carried out the numerical simulation and experiment. The results show that the scanning step has little influence on the surface quality of the line when it is much smaller than the size of the solidification unit. However, with increasing scanning step, the smoothness of line surface is reduced rapidly, and the surface quality becomes much worse.

  9. Characterization of bulk-micromachined direct-bonded silicon nanofilters

    Science.gov (United States)

    Tu, Jay K.; Huen, Tony; Szema, Robert; Ferrari, Mauro

    1998-03-01

    The ability to separate 30-100 nm particles - nanofiltration - is critical for many biomedical applications. Where this filtration needs to be absolute, such as for viral elimination in the blood fractionation process, the large variations in pore size found with conventional polymeric filters can lead to the unwanted presence of viruses in the filtrate. To overcome this problem, we have developed a filter with micromachined channels sandwiched between two bonded silicon wafers. These channels are formed through the selective deposition and then removal of a thermally-grown oxide, the thickness of which can be controlled to +/- 4 percent for 30 nm pores. In this paper, we will present both the gas and liquid characterization, and the filtration studies done on 44 and 100 nm beads.

  10. A Micro-Machined Gyroscope for Rotating Aircraft

    Directory of Open Access Journals (Sweden)

    Fuxue Zhang

    2012-07-01

    Full Text Available In this paper we present recent work on the design, fabrication by silicon micromachining, and packaging of a new gyroscope for stabilizing the autopilot of rotating aircraft. It operates based on oscillation of the silicon pendulum between two torsion girders for detecting the Coriolis force. The oscillation of the pendulum is initiated by the rolling and deflecting motion of the rotating carrier. Therefore, the frequency and amplitude of the oscillation are proportional to the rolling frequency and deflecting angular rate of the rotating carrier, and are measured by the sensing electrodes. A modulated pulse with constant amplitude and unequal width is obtained by a linearizing process of the gyroscope output signal and used to control the deflection of the rotating aircraft. Experimental results show that the gyroscope has a resolution of 0.008 °/s and a bias of 56.18 °/h.

  11. Micromachined Systems-on-a-Chip: Infrastructure, Technology and Applications

    Energy Technology Data Exchange (ETDEWEB)

    Allen, J. J.; Krygowski, T. W.; Miller, S. L.; Montague, S.; Rodgers, M. S.; Schriner, H.; Smith, J. H.; Sniegowski, J. J.

    1998-10-09

    A review is made of the infrastructure, technology and capabilities of Sandia National Laboratories for the development of micromechanical systems that have potential space applications. By incorporating advanced fabrication processes, such as chemical mechanical polishing, and several mechanical polysilicon levels, the range' of rrticromechanical systems that can be fabricated in these technologies is virtually limitless. Representative applications include a micro- engine driven mirror, and a micromachined lock. Using a novel integrated MEM!YCMOS technology, a six degree-of-freedom accelerometer/gyroscope system has been designed by researchers at U.C. Berkeley and fabricated on the same silicon chip as the CMOS control circuits to produce an integrated micro-navigational unit.

  12. Optofluidic Microlasers based on Femtosecond Micromachining Technology

    Directory of Open Access Journals (Sweden)

    Simoni F.

    2017-08-01

    Full Text Available We present the different optofluidic lasers which have been realized using the Femtosecond Micromachining technique to fabricate the monolithic optofluidic structures in glass chips. We show how the great flexibility of this 3D technique allows getting different kind of optical cavities. The most recent devices fabricated by this technique as ring shaped and Fabry-Perot resonators show excellent emission performances.We also point out how the addition of the inkjet printing technique provides further opportunities in realizing optofluidic chips.

  13. Flexure-beam micromirror devices and potential expansion for smart micromachining

    Science.gov (United States)

    Lin, Tseng-Hwang

    1996-05-01

    Texas Instruments has been developing both digital and analog micromirror devices since the late 1970s. The analog flexure-beam micromirror devices are primarily targeted for imaging identification. Digital multiplexing mechanisms are used in column and row selection to address discretized analog signals into the array. Amplifiers and sample-and-hold circuits provide the appropriate signal range to control the micromirrors. Analog-to-digital and digital- to-analog conversions are currently built into the interface electronics, and will potentially be built into the chip. The micromirror devices are built on the top of the addressing circuits using sacrificial layers and two different metal layers. This concept of surface micromachining and mixed-signal circuit integration enables us to investigate the possibility of smart micromachining. Micromirror device applications can expand beyond optical applications into microsensor and other microactuator areas. The addressing circuits can be used in the interface of analog real-world and smart control circuits.

  14. Photochemical Transformation Processes in Sunlit Surface Waters

    Science.gov (United States)

    Vione, D.

    2012-12-01

    Photochemical reactions are major processes in the transformation of hardly biodegradable xenobiotics in surface waters. They are usually classified into direct photolysis and indirect or sensitised degradation. Direct photolysis requires xenobiotic compounds to absorb sunlight, and to get transformed as a consequence. Sensitised transformation involves reaction with transient species (e.g. °OH, CO3-°, 1O2 and triplet states of chromophoric dissolved organic matter, 3CDOM*), photogenerated by so-called photosensitisers (nitrate, nitrite and CDOM). CDOM is a major photosensitiser: is it on average the main source of °OH (and of CO3-° as a consequence, which is mainly produced upon oxidation by °OH of carbonate and bicarbonate) and the only important source of 1O2 and 3CDOM* [1, 2]. CDOM origin plays a key role in sensitised processes: allochthonous CDOM derived from soil runoff and rich in fulvic and humic substances is usually more photoactive than autochthonous CDOM (produced by in-water biological processes and mainly consisting of protein-like material) or of CDOM derived from atmospheric deposition. An interesting gradual evolution of CDOM origin and photochemistry can be found in mountain lakes across the treeline, which afford a gradual transition of allochthonous- autochtonous - atmopheric CDOM when passing from trees to alpine meadows to exposed rocks [3]. Another important issue is the sites of reactive species photoproduction in CDOM. While there is evidence that smaller molecular weight fractions are more photoactive, some studies have reported considerable 1O2 reactivity in CDOM hydrophobic sites and inside particles [4]. We have recently addressed the problem and found that dissolved species in standard humic acids (hydrodynamic diameter pollutants to be assessed and modelled. For instance, it is possible to predict pollutant half-life times by knowing absorption spectrum, direct photolysis quantum yield and reaction rate constants with °OH, CO3

  15. Process control & monitoring for laser micromaching of Si3N4 ceramics

    CSIR Research Space (South Africa)

    Tshabalala, L

    2012-09-01

    Full Text Available , the formation of deep grooves often produced cracks that reduce the material strength. This work explores the diagnostic parameters of solid state lasers varying wavelength and pulse duration for ceramic micromachining. The micromachining process parameters...

  16. Excimer laser surface modification: Process and properties

    Energy Technology Data Exchange (ETDEWEB)

    Jervis, T.R.; Nastasi, M. [Los Alamos National Lab., NM (United States); Hirvonen, J.P. [Technical Research Institute, Espoo (Finland). Metallurgy Lab.

    1992-12-01

    Surface modification can improve materials for structural, tribological, and corrosion applications. Excimer laser light has been shown to provide a rapid means of modifying surfaces through heat treating, surface zone refining, and mixing. Laser pulses at modest power levels can easily melt the surfaces of many materials. Mixing within the molten layer or with the gas ambient may occur, if thermodynamically allowed, followed by rapid solidification. The high temperatures allow the system to overcome kinetic barriers found in some ion mixing experiments. Alternatively, surface zone refinement may result from repeated melting-solidification cycles. Ultraviolet laser light couples energy efficiently to the surface of metallic and ceramic materials. The nature of the modification that follows depends on the properties of the surface and substrate materials. Alloying from both gas and predeposited layer sources has been observed in metals, semiconductors, and ceramics as has surface enrichment of Cr by zone refinement of stainless steel. Rapid solidification after melting often results in the formation of nonequilibrium phases, including amorphous materials. Improved surface properties, including tribology and corrosion resistance, are observed in these materials.

  17. New Effective Material Couple--Oxide Ceramic and Carbon Nanotube-- Developed for Aerospace Microsystem and Micromachine Technologies

    Science.gov (United States)

    Miyoshi, Kazuhisa; VanderWal, Randall L.; Tomasek, Aaron J.; Sayir, Ali; Farmer, Serene C.

    2004-01-01

    lubrication task because of their potential for superior friction and wearf properties in air and in an ultrahigh vacuum, spacelike environment. At the NASA Glenn Research Center, two-phase oxide ceramic eutectics, Al2O3/ZrO2(Y2O3), were directionally solidified using the laser-float-zone process, and carbon nanotubes were synthesized within a high-temperature tube furnace at 800 C. Physical vapor deposition was used to coat all quartz substrates with 5-nm-thick iron as catalyst and bondcoat, which formed iron islands resembling droplets and serving as catalyst particles on the quartz. A series of scanning electron micrographs showing multiwalled carbon nanotubes directionally grown as aligned "nanograss" on quartz is presented. Unidirectional sliding friction eperiments were conducted at Glenn with the two-layered CNT coatings in contact with the two-phase Al2O3/ZrO2(Y2O3) eutectics in air and in ultrachigh vacuum. The main criteria for judging the performance of the materials couple for solid lubrication and antistick applications in a space environment were the coefficient of friction and the wear resistance (reciprocal of wear rate), which had to be less than 0.2 and greater than 10(exp 5) N(raised dot)/cubic millimetes, respectively, in ultrahigh vacuum. In air, the coefficient of friction for the CNT coatings in contact with Al2O3/ZrO2 (Y2O3) eutectics was 0.04, one-fourth of that for quartz. In an ultrahigh vacuum, the coefficient of friction for CNT coatings in contact with Al2O3/ZrO2 (Y2O3) was one-third of that for quartz. The two-phase Al2O3/ZrO2 (Y2O3) eutectic coupled with the two-layered CNT coating met the coefficient of friction and wear resistance criteria both in air and in an ultrahigh vacuum, spacelike environment. This material's couple can dramatically improve the stiction (or adhesion), friction, and wear resistance of the contacting surfaces, which are major issues for microdevices and micromachines.

  18. Process control of laser surface alloying

    NARCIS (Netherlands)

    Römer, Gerardus Richardus, Bernardus, Engelina; Meijer, J.; Olde Benneker, Jeroen

    1998-01-01

    In spite of the many advantages of laser surface treatment, such as high production rates and low induced thermal distortion, and its great potential for modifying the surface properties of a wide range of new and existing materials, industrial applications are still limited. This is not only

  19. Fabrication and characterization of a micromachined swirl-shaped ionic polymer metal composite actuator with electrodes exhibiting asymmetric resistance.

    Science.gov (United States)

    Feng, Guo-Hua; Liu, Kim-Min

    2014-05-12

    This paper presents a swirl-shaped microfeatured ionic polymer-metal composite (IPMC) actuator. A novel micromachining process was developed to fabricate an array of IPMC actuators on a glass substrate and to ensure that no shortcircuits occur between the electrodes of the actuator. We demonstrated a microfluidic scheme in which surface tension was used to construct swirl-shaped planar IPMC devices of microfeature size and investigated the flow velocity of Nafion solutions, which formed the backbone polymer of the actuator, within the microchannel. The unique fabrication process yielded top and bottom electrodes that exhibited asymmetric surface resistance. A tool for measuring surface resistance was developed and used to characterize the resistances of the electrodes for the fabricated IPMC device. The actuator, which featured asymmetric electrode resistance, caused a nonzero-bias current when the device was driven using a zero-bias square wave, and we propose a circuit model to describe this phenomenon. Moreover, we discovered and characterized a bending and rotating motion when the IPMC actuator was driven using a square wave. We observed a strain rate of 14.6% and a displacement of 700 μm in the direction perpendicular to the electrode surfaces during 4.5-V actuation.

  20. Automated micromachining at the NSLS

    International Nuclear Information System (INIS)

    Ramotowski, Michelle; Johnson, Erik

    2000-01-01

    X14B, the newest beamline at the NSLS, saw its first light early this summer. Designed solely for deep x-ray lithography (DXRL), it is intended for processing large quantities of deep (up to a few mm), but essentially 2D in design, parts. It has an effective scan area of 637 cm2, and a hydraulic scan stage to move that area through the beam. In addition, work is being done at X27B for the development of in-the-round and true 3D lithography. The hydraulic scan stages, filter motors, and sample positioning motors on both beamlines are computer controlled. Scan time and speed are calculated based on beam current, and a beam monitor stops the scan if necessary (due to unexpected beam dump, etc) and re-starts it when appropriate. The user can start a scan to run overnight, and return the next morning to pick up a completed sample. In addition, scan progress can be checked remotely via a web page

  1. Planar Indium Tin Oxide Heater for Improved Thermal Distribution for Metal Oxide Micromachined Gas Sensors.

    Science.gov (United States)

    Çakır, M Cihan; Çalışkan, Deniz; Bütün, Bayram; Özbay, Ekmel

    2016-09-29

    Metal oxide gas sensors with integrated micro-hotplate structures are widely used in the industry and they are still being investigated and developed. Metal oxide gas sensors have the advantage of being sensitive to a wide range of organic and inorganic volatile compounds, although they lack selectivity. To introduce selectivity, the operating temperature of a single sensor is swept, and the measurements are fed to a discriminating algorithm. The efficiency of those data processing methods strongly depends on temperature uniformity across the active area of the sensor. To achieve this, hot plate structures with complex resistor geometries have been designed and additional heat-spreading structures have been introduced. In this work we designed and fabricated a metal oxide gas sensor integrated with a simple square planar indium tin oxide (ITO) heating element, by using conventional micromachining and thin-film deposition techniques. Power consumption-dependent surface temperature measurements were performed. A 420 °C working temperature was achieved at 120 mW power consumption. Temperature distribution uniformity was measured and a 17 °C difference between the hottest and the coldest points of the sensor at an operating temperature of 290 °C was achieved. Transient heat-up and cool-down cycle durations are measured as 40 ms and 20 ms, respectively.

  2. Planar Indium Tin Oxide Heater for Improved Thermal Distribution for Metal Oxide Micromachined Gas Sensors

    Directory of Open Access Journals (Sweden)

    M. Cihan Çakır

    2016-09-01

    Full Text Available Metal oxide gas sensors with integrated micro-hotplate structures are widely used in the industry and they are still being investigated and developed. Metal oxide gas sensors have the advantage of being sensitive to a wide range of organic and inorganic volatile compounds, although they lack selectivity. To introduce selectivity, the operating temperature of a single sensor is swept, and the measurements are fed to a discriminating algorithm. The efficiency of those data processing methods strongly depends on temperature uniformity across the active area of the sensor. To achieve this, hot plate structures with complex resistor geometries have been designed and additional heat-spreading structures have been introduced. In this work we designed and fabricated a metal oxide gas sensor integrated with a simple square planar indium tin oxide (ITO heating element, by using conventional micromachining and thin-film deposition techniques. Power consumption–dependent surface temperature measurements were performed. A 420 °C working temperature was achieved at 120 mW power consumption. Temperature distribution uniformity was measured and a 17 °C difference between the hottest and the coldest points of the sensor at an operating temperature of 290 °C was achieved. Transient heat-up and cool-down cycle durations are measured as 40 ms and 20 ms, respectively.

  3. Process of treating surfaces of metals

    International Nuclear Information System (INIS)

    Kimura, T.; Murao, A.; Kuwahara, T.

    1975-01-01

    Both higher corrosion resistance and paint adherence are given to films formed on the surfaces of metals by treating the surfaces with aqueous solutions of one or more materials selected from the group consisting of water soluble vinyl monomer or water soluble high polymer and then irradiating with ionizing radioactive rays on the nearly dried surface film. When a water soluble inorganic compound is mixed with the above mentioned aqueous solution, the film properties are greatly improved. The inorganic ionic material should contain a cation from the group consisting of Ca, Mg, Zn, Cr, Al, Fe, and Ni. Electron beams may be used. (U.S.)

  4. Modification of surfaces and surface layers by non equilibrium processes

    International Nuclear Information System (INIS)

    Beamson, G.; Brennan, W.J.; Clark, D.T.; Howard, J.

    1988-01-01

    Plasmas are examples of non-equilibrium phenomena which are being used increasingly for the synthesis and modification of materials impossible by conventional routes. This paper introduces methods available by describing the construction and characteristics of some equipment used for the production of different types of plasmas and other non-equilibrium phenomena. This includes high energy ion beams. The special features, advantages and disadvantages of the techniques will be described. There are a multitude of potential application relevant to electronic, metallic, ceramic, and polymeric materials. However, scale-up from the laboratory to production equipment depends on establishing a better understanding of both the physics and chemistry of plasma as well as plasma-solid interactions. Examples are given of how such an understanding can be gained. The chemical analysis of polymer surfaces undergoing modification by inert gas, hydrogen or oxygen plasmas is shown to give physical information regarding the relative roles of diffusion of active species, and direct and radiative energy transfer from the plasma. Surface modification by plasma depositing a new material onto an existing substrate is discussed with particular reference to the deposition of amorphous carbon films. Applications of the unique properties of these films are outlined together with our current understanding of these properties based on chemical and physical methods of analysis of both the films and the plasmas producing them. Finally, surface modification by ion beams is briefly illustrated using examples from the electronics and metals industries where the modification has had a largely physical rather than chemical effect on the starting material. (orig.)

  5. MEASUREMENT OF NANOSTRUCTURES WITH MICROMACHINED MICROSCOPES

    Energy Technology Data Exchange (ETDEWEB)

    G.S. KINO; W.E. MOERNER

    2005-04-30

    We have made reproducible scanning probes with high efficiency, and predictable and reproducible character-istics. We obtained good efficiency with dimensions well below the diffraction limit, so that rela-tively small laser powers in the milliwatt range can be used. For single frequency operation, only low power is necessary to obtain very high fields for the excitation of well-defined Raman scattering, and to work in a reflection mode with good scanning speeds; obtained predictable results with very high fields suitable for obtaining Raman scattering and two-photon scattering; made a scanning probe mounted on a micromachined cantilever to obtain high definition reflection mode images that can be scanned rapidly;and observed Raman scattering using bowtie antennas with CW excitation.

  6. Micromachined two dimensional resistor arrays for determination of gas parameters

    NARCIS (Netherlands)

    van Baar, J.J.J.; Verwey, Willem B.; Dijkstra, Mindert; Dijkstra, Marcel; Wiegerink, Remco J.; Lammerink, Theodorus S.J.; Krijnen, Gijsbertus J.M.; Elwenspoek, Michael Curt

    A resistive sensor array is presented for two dimensional temperature distribution measurements in a micromachined flow channel. This allows simultaneous measurement of flow velocity and fluid parameters, like thermal conductivity, diffusion coefficient and viscosity. More general advantages of

  7. Structure optimization and simulation analysis of the quartz micromachined gyroscope

    Directory of Open Access Journals (Sweden)

    Xuezhong Wu

    2014-02-01

    Full Text Available Structure optimization and simulation analysis of the quartz micromachined gyroscope are reported in this paper. The relationships between the structure parameters and the frequencies of work mode were analysed by finite element analysis. The structure parameters of the quartz micromachined gyroscope were optimized to reduce the difference between the frequencies of the drive mode and the sense mode. The simulation results were proved by testing the prototype gyroscope, which was fabricated by micro-electromechanical systems (MEMS technology. Therefore, the frequencies of the drive mode and the sense mode can match each other by the structure optimization and simulation analysis of the quartz micromachined gyroscope, which is helpful in the design of the high sensitivity quartz micromachined gyroscope.

  8. Integration of Capacitive Micromachined Ultrasound Transducers to Microfluidic Devices

    KAUST Repository

    Viržonis, Darius

    2013-10-22

    The design and manufacturing flexibility of capacitive micromachined ultrasound transducers (CMUT) makes them attractive option for integration with microfluidic devices both for sensing and fluid manipulation. CMUT concept is introduced here by presentin

  9. Biasing of Capacitive Micromachined Ultrasonic Transducers.

    Science.gov (United States)

    Caliano, Giosue; Matrone, Giulia; Savoia, Alessandro Stuart

    2017-02-01

    Capacitive micromachined ultrasonic transducers (CMUTs) represent an effective alternative to piezoelectric transducers for medical ultrasound imaging applications. They are microelectromechanical devices fabricated using silicon micromachining techniques, developed in the last two decades in many laboratories. The interest for this novel transducer technology relies on its full compatibility with standard integrated circuit technology that makes it possible to integrate on the same chip the transducers and the electronics, thus enabling the realization of extremely low-cost and high-performance devices, including both 1-D or 2-D arrays. Being capacitive transducers, CMUTs require a high bias voltage to be properly operated in pulse-echo imaging applications. The typical bias supply residual ripple of high-quality high-voltage (HV) generators is in the millivolt range, which is comparable with the amplitude of the received echo signals, and it is particularly difficult to minimize. The aim of this paper is to analyze the classical CMUT biasing circuits, highlighting the features of each one, and to propose two novel HV generator architectures optimized for CMUT biasing applications. The first circuit proposed is an ultralow-residual ripple (CMUT by charging a buffer capacitor synchronously with the pulsing sequence, thus reducing the impact of the switching noise on the received echo signals. The small area of the circuit (about 1.5 cm 2 ) makes it possible to generate the bias voltage inside the probe, very close to the CMUT, making the proposed solution attractive for portable applications. Measurements and experiments are shown to demonstrate the effectiveness of the new approaches presented.

  10. In-fiber whispering-gallery-mode resonator fabricated by femtosecond laser micromachining.

    Science.gov (United States)

    Shi, Leilei; Zhu, Tao; Huang, Dongmei; Liu, Min; Deng, Ming; Huang, Wei

    2015-08-15

    An in-fiber whispering-gallery-mode resonator fabricated by femtosecond laser micromachining is demonstrated. The cylinder resonator cavity is fabricated by scanning the D-fiber cladding with infrared femtosecond pulses along a cylindrical trace with a radius of 25 μm and height of 20 μm. Quality factor on the order of 10(3) is achieved by smoothing the cavity surface with an ultrasonic cleaner, which is mainly limited by the surface roughness of several hundred nanometers. Resonant characteristics and polarization dependence of the proposed resonator are also studied in detail. Our method takes a step forward in the integration of whispering-gallery-mode resonators.

  11. A Micromachined Infrared Senor for an Infrared Focal Plane Array

    Directory of Open Access Journals (Sweden)

    Seong M. Cho

    2008-04-01

    Full Text Available A micromachined infrared sensor for an infrared focal plane array has been designed and fabricated. Amorphous silicon was used as a sensing material, and silicon nitride was used as a membrane material. To get a good absorption in infrared range, the sensor structure was designed as a l/4 cavity structure. A Ni-Cr film was selected as an electrode material and mixed etching scheme was applied in the patterning process of the Ni-Cr electrode. All the processes were made in 0.5 μm iMEMS fabricated in the Electronics and Telecommunication Research Institute (ETRI. The processed MEMS sensor had a small membrane deflection less than 0.15 μm. This small deflection can be attributed to the rigorous balancing of the stresses of individual layers. The efficiency of infrared absorption was more than 75% in the wavelength range of 8 ~ 14 μm. The processed infrared sensor showed high responsivity of ~230 kV/W at 1.0V bias and 2 Hz operation condition. The time constant of the sensor was 8.6 msec, which means that the sensor is suitable to be operated in 30 Hz frame rate.

  12. Surface Electromyography Signal Processing and Classification Techniques

    Science.gov (United States)

    Chowdhury, Rubana H.; Reaz, Mamun B. I.; Ali, Mohd Alauddin Bin Mohd; Bakar, Ashrif A. A.; Chellappan, Kalaivani; Chang, Tae. G.

    2013-01-01

    Electromyography (EMG) signals are becoming increasingly important in many applications, including clinical/biomedical, prosthesis or rehabilitation devices, human machine interactions, and more. However, noisy EMG signals are the major hurdles to be overcome in order to achieve improved performance in the above applications. Detection, processing and classification analysis in electromyography (EMG) is very desirable because it allows a more standardized and precise evaluation of the neurophysiological, rehabitational and assistive technological findings. This paper reviews two prominent areas; first: the pre-processing method for eliminating possible artifacts via appropriate preparation at the time of recording EMG signals, and second: a brief explanation of the different methods for processing and classifying EMG signals. This study then compares the numerous methods of analyzing EMG signals, in terms of their performance. The crux of this paper is to review the most recent developments and research studies related to the issues mentioned above. PMID:24048337

  13. Singulation for imaging ring arrays of capacitive micromachined ultrasonic transducers

    International Nuclear Information System (INIS)

    Chang, Chienliu; Moini, Azadeh; Nikoozadeh, Amin; Sarioglu, Ali Fatih; Apte, Nikhil; Zhuang, Xuefeng; Khuri-Yakub, Butrus T

    2014-01-01

    Singulation of MEMS is a critical step in the transition from wafer-level to die-level devices. As is the case for capacitive micromachined ultrasound transducer (CMUT) ring arrays, an ideal singulation must protect the fragile membranes from the processing environment while maintaining a ring array geometry. The singulation process presented in this paper involves bonding a trench-patterned CMUT wafer onto a support wafer, deep reactive ion etching (DRIE) of the trenches, separating the CMUT wafer from the support wafer and de-tethering the CMUT device from the CMUT wafer. The CMUT arrays fabricated and singulated in this process were ring-shaped arrays, with inner and outer diameters of 5 mm and 10 mm, respectively. The fabricated CMUT ring arrays demonstrate the ability of this method to successfully and safely singulate the ring arrays and is applicable to any arbitrary 2D shaped MEMS device with uspended microstructures, taking advantage of the inherent planar attributes of DRIE. (technical note)

  14. Singulation for imaging ring arrays of capacitive micromachined ultrasonic transducers

    Science.gov (United States)

    Chang, Chienliu; Moini, Azadeh; Nikoozadeh, Amin; Sarioglu, Ali Fatih; Apte, Nikhil; Zhuang, Xuefeng; Khuri-Yakub, Butrus T.

    2014-10-01

    Singulation of MEMS is a critical step in the transition from wafer-level to die-level devices. As is the case for capacitive micromachined ultrasound transducer (CMUT) ring arrays, an ideal singulation must protect the fragile membranes from the processing environment while maintaining a ring array geometry. The singulation process presented in this paper involves bonding a trench-patterned CMUT wafer onto a support wafer, deep reactive ion etching (DRIE) of the trenches, separating the CMUT wafer from the support wafer and de-tethering the CMUT device from the CMUT wafer. The CMUT arrays fabricated and singulated in this process were ring-shaped arrays, with inner and outer diameters of 5 mm and 10 mm, respectively. The fabricated CMUT ring arrays demonstrate the ability of this method to successfully and safely singulate the ring arrays and is applicable to any arbitrary 2D shaped MEMS device with uspended microstructures, taking advantage of the inherent planar attributes of DRIE.

  15. Exploitation of capacitive micromachined transducers for nonlinear ultrasound imaging.

    Science.gov (United States)

    Novell, Anthony; Legros, Mathieu; Felix, Nicolas; Bouakaz, Ayache

    2009-12-01

    Capacitive micromachined ultrasonic transducers (CMUTs) present advantages such as wide frequency bandwidth, which could be further developed for nonlinear imaging. However, the driving electrostatic force induces a nonlinear behavior of the CMUT, thus generating undesirable harmonic components in the generated acoustic signal. Consequently, the use of CMUT for harmonic imaging (with or without contrast agents) becomes challenging. This paper suggests 2 compensation approaches, linear and nonlinear methods, to cancel unwanted nonlinear components. Furthermore, nonlinear responses from contrast agent were evaluated using CMUT in transmit before and after compensation. The results were compared with those obtained using a PZT transducer in transmit. Results showed that CMUT nonlinear behavior is highly influenced by the excitation to bias voltage ratio. Measurements of output pressure very close to the CMUT surface allow the estimation of optimal parameters for each compensation approach. Both methods showed a harmonic reduction higher than 20 dB when one element or several elements are excited. In addition, the study demonstrates that nonlinear approach seems to be more efficient because it is shown to be less sensitive to interelement variability and further avoids fundamental component deterioration. The results from contrast agent measurements showed that the responses obtained using CMUT elements in transmit with compensation were similar to those from PZT transducer excitation. This experimental study demonstrates the opportunity to use CMUT with traditional harmonic contrast imaging techniques.

  16. 3DX: a micromachined silicon crystallographic x-ray detector

    Science.gov (United States)

    Morse, John; Kenney, Christopher J.; Westbrook, Edwin M.; Naday, Istvan; Parker, Sherwood I.

    2003-01-01

    We are developing pixel detectors for macromolecular crystallography, in which diffracted X-rays are directly absorbed by high-resistivity, crystalline silicon that has been micro-machined by inductively-coupled plasma etching. Arrays of 64 × 64 holes at 150 μm pitch are first formed by etching through the entire silicon bulk, then backfilled with polysilicon that is doped to create conducting p and n type columnar electrodes. When reverse biased, these electrodes generate electric fields that define the individual pixels. By forming conducting polysilicon on the sides of the sensors, which are cut-out of the silicon wafer by plasma etching, the entire surface of the detector may be made active. CMOS readout integrated circuits are conductively bump bonded behind each 3D detector, providing a direct connection to every pixel. A large array will be assembled with no insensitive bands along the edges by overlapping these sensors, each of area 0.96cm2. This detector will measure X-ray signal intensities of up to 105 events/pixel/sec without any pile-up loss, by using an integration method that retains the benefits of discrete photon counting. The detector sensitivity will be highly uniform, it will not exhibit any dark signal or spurious noise, and no geometric distortion will occur within each sensor.

  17. A Novel Heat Treatment Process for Surface Hardening of Steel: Metal Melt Surface Hardening

    Science.gov (United States)

    Fu, Yong-sheng; Zhang, Wei; Xu, Xiaowei; Li, Jiehua; Li, Jun; Xia, Mingxu; Li, Jianguo

    2017-09-01

    A novel heat treatment process for surface hardening of steel has been demonstrated and named as "metal melt surface hardening (MMSH)." A surface layer with a thickness of about 400 μm and a hardness of about 700 HV has been achieved by ejecting AISI 304 stainless steel melt at a temperature of about 1783 K (1510 °C) onto the 40Cr steel surface. This proposed MMSH provides a very promising application for surface hardening of steel.

  18. Computer simulation of surface and film processes

    Science.gov (United States)

    Tiller, W. A.; Halicioglu, M. T.

    1984-01-01

    All the investigations which were performed employed in one way or another a computer simulation technique based on atomistic level considerations. In general, three types of simulation methods were used for modeling systems with discrete particles that interact via well defined potential functions: molecular dynamics (a general method for solving the classical equations of motion of a model system); Monte Carlo (the use of Markov chain ensemble averaging technique to model equilibrium properties of a system); and molecular statics (provides properties of a system at T = 0 K). The effects of three-body forces on the vibrational frequencies of triatomic cluster were investigated. The multilayer relaxation phenomena for low index planes of an fcc crystal was analyzed also as a function of the three-body interactions. Various surface properties for Si and SiC system were calculated. Results obtained from static simulation calculations for slip formation were presented. The more elaborate molecular dynamics calculations on the propagation of cracks in two-dimensional systems were outlined.

  19. Auger processes in ion-surface collisions

    International Nuclear Information System (INIS)

    Zampieri, Guillermo.

    1985-01-01

    Bombardment of solid targets with low-energy noble gas ions can produce Auger electron emission from the target atoms and/or from the projectiles. In the case of Auger emission from the projectile, Auger emission was observed during the bombardment of Na, Mg, Al and Si with Ne + ions. This emission was studied as a function of the energy, incidence angle and charge state of the projectile. From the analysis, it is concluded that the emission originates in the decay in vacuum of excited and reflected Ne atoms, moving outside the surface. Auger emission was not observed during the bombardment of K, V and Ni with Ar + ions; Zr and Cs with Kr + , and Xe + ions, respectively; and Li and Be with He + ions. In the case of Auger emission from the target, studies of certain aspects of the Na, Mg and Al Auger electron emission spectra were made. The results allow to identify two components in the Auger feature, coresponding to two kinds of Auger transition. The total spectra results from the superposition of both kinds of emission. Auger spectra from K obtained during Ar + and K + bombardment of K-implanted Be, Mg, Al and Cu were also analyzed. Similar to the Na, Mg and Al Auger spectra, the K Auger feature is composed of an atomic like peak superimposed on a bandlike structure. Both components correspond to Auger transitions in K atoms with a 3p vacancy, occuring in vacuum and inside the solid, respectively. (M.E.L.) [es

  20. Molecular-Scale Lubricants for Micromachine Applications: Final Report

    Energy Technology Data Exchange (ETDEWEB)

    Burns, A.R.; Dugger, M.T.; Houston, J.E.; Lopez, G.P.; Mayer, T.M.; Michalske, T.A.; Miller, S.L.; Sniegowski, J.J.; Stevens, M.J.; Zhou, Y.

    1998-12-01

    The nature of this work was to develop the physics and chemistry base for understanding molecular-scale lubricants used to reduce of friction- and adhesion-induced failure in silicon micromachines (MEMS). We acquired this new knowledge by tailoring the molecular properties of the lubricants, applying local probes that can directly monitor the response of lubricants in contact conditions, and evaluating the performance of model lubricants MEMS devices. Model lubricants under investigation were the silane coupling agents that form monolayer films on native oxide silicon surfaces, which is the substrate in MEMS. These molecules bind via strong surface bonds and produce a layer of hydro- or fluoro-carbon chains normal to the substrate. "Tailoring" the lubricants entails modifying the chain length, the chain chemical reactivity (H or F), and the density of chain structures. Thus much effort went into understanding the surface chemistry of silane-silicon oxide coupling. With proximal probes such as atomic force microscopy (AFM), interracial force microscopy (FM), and shear force microscopy in combination with IFM, we examined the frictional and adhesive properties of the silane films with very high spatial resolution (< 100 nm) and sensitivity. MEMS structures are treated with silanes under identical conditions, and examined for friction and adhesion under operating conditions. Proper assessment of the lubricants required quantitative analysis of MEMS performance at high speeds and long operating times. Our proximal probe measurements and WS performance analyses form a very important link for future molecular dynamics simulations, that, in turn, should be able to predict MEMS performance under all conditions.

  1. Development of capacitive micromachined ultrasonic transducer for noncontact ultrasonic detection

    Energy Technology Data Exchange (ETDEWEB)

    Kim, Ki Bok; Ahn, Bong Young; Park, Hae Won; Kim, Young Joo; Lee, Seung Seok [Center for Environment and Safrty Measurement, KRISS, Daejeon (Korea, Republic of)

    2004-11-15

    In this study, the capacitive micromachined ultrasonic transducer (cMUT) was developed. Theoretical analysis and finite element analysis of the behavior of membrane (such as resonance frequency, membrane deflection, collapse deflection and collapse voltage) of the cMUT were performed. The design parameters of the cMUT were estimated and are the dimension and thickness of membrane, thickness of sacrificial layer, thickness and size of electrode, size of active element and so on. With the micro-fabrication process, the cMUT was fabricated on the silicon wafer. To measure the membrane displacement of cMUT, the Michelson phase modulation fiber interferometer was constructed. The measured membrane displacement was good agreed with the result of finite element analysis. To estimate the ultrasonic wave generated by the cMUT, the ultrasonic transceiver system was constructed. The developed cMUT shows a good performance and hence will be widely used to the filed of non-contact ultrasonic application.

  2. Development of capacitive micromachined ultrasonic transducer for noncontact ultrasonic detection

    International Nuclear Information System (INIS)

    Kim, Ki Bok; Ahn, Bong Young; Park, Hae Won; Kim, Young Joo; Lee, Seung Seok

    2004-01-01

    In this study, the capacitive micromachined ultrasonic transducer (cMUT) was developed. Theoretical analysis and finite element analysis of the behavior of membrane (such as resonance frequency, membrane deflection, collapse deflection and collapse voltage) of the cMUT were performed. The design parameters of the cMUT were estimated and are the dimension and thickness of membrane, thickness of sacrificial layer, thickness and size of electrode, size of active element and so on. With the micro-fabrication process, the cMUT was fabricated on the silicon wafer. To measure the membrane displacement of cMUT, the Michelson phase modulation fiber interferometer was constructed. The measured membrane displacement was good agreed with the result of finite element analysis. To estimate the ultrasonic wave generated by the cMUT, the ultrasonic transceiver system was constructed. The developed cMUT shows a good performance and hence will be widely used to the filed of non-contact ultrasonic application.

  3. Encapsulation of Capacitive Micromachined Ultrasonic Transducers Using Viscoelastic Polymer

    Science.gov (United States)

    Lin, Der-Song; Zhuang, Xuefeng; Wong, Serena H.; Kupnik, Mario; Khuri-Yakub, Butrus Thomas

    2010-01-01

    The packaging of a medical imaging or therapeutic ultrasound transducer should provide protective insulation while maintaining high performance. For a capacitive micromachined ultrasonic transducer (CMUT), an ideal encapsulation coating would therefore require a limited and predictable change on the static operation point and the dynamic performance, while insulating the high dc and dc actuation voltages from the environment. To fulfill these requirements, viscoelastic materials, such as polydimethylsiloxane (PDMS), were investigated for an encapsulation material. In addition, PDMS, with a glass-transition temperature below room temperature, provides a low Young's modulus that preserves the static behavior; at higher frequencies for ultrasonic operation, this material becomes stiffer and acoustically matches to water. In this paper, we demonstrate the modeling and implementation of the viscoelastic polymer as the encapsulation material. We introduce a finite element model (FEM) that addresses viscoelasticity. This enables us to correctly calculate both the static operation point and the dynamic behavior of the CMUT. CMUTs designed for medical imaging and therapeutic ultrasound were fabricated and encapsulated. Static and dynamic measurements were used to verify the FEM and show excellent agreement. This paper will help in the design process for optimizing the static and the dynamic behavior of viscoelastic-polymer-coated CMUTs. PMID:21170294

  4. Superhydrophobic coatings for aluminium surfaces synthesized by chemical etching process

    Directory of Open Access Journals (Sweden)

    Priya Varshney

    2016-10-01

    Full Text Available In this paper, the superhydrophobic coatings on aluminium surfaces were prepared by two-step (chemical etching followed by coating and one-step (chemical etching and coating in a single step processes using potassium hydroxide and lauric acid. Besides, surface immersion time in solutions was varied in both processes. Wettability and surface morphologies of treated aluminium surfaces were characterized using contact angle measurement technique and scanning electron microscopy, respectively. Microstructures are formed on the treated aluminium surfaces which lead to increase in contact angle of the surface (>150°. Also on increasing immersion time, contact angle further increases due to increase in size and depth of microstructures. Additionally, these superhydrophobic coatings show excellent self-cleaning and corrosion-resistant behavior. Water jet impact, floatation on water surface, and low temperature condensation tests assert the excellent water-repellent nature of coatings. Further, coatings are to be found mechanically, thermally, and ultraviolet stable. Along with, these coatings are found to be excellent regeneration ability as verified experimentally. Although aforesaid both processes generate durable and regenerable superhydrophobic aluminium surfaces with excellent self-cleaning, corrosion-resistant, and water-repellent characteristics, but one-step process is proved more efficient and less time consuming than two-step process and promises to produce superhydrophobic coatings for industrial applications.

  5. SURFACE CAST IRON STRENGTHENING USING COMBINED LASER AND ULTRASONIC PROCESSING

    Directory of Open Access Journals (Sweden)

    O. G. Devojno

    2013-01-01

    Full Text Available The paper provides an analysis of ultrasonic surface plastic deformation and subsequent laser thermal strengthening of gray cast iron parts in the regime of hardening from a solid state with the purpose to obtain strengthened surface layers of bigger depth and less roughness of the processed surface. Program complex ANSYS 11.0 has been used for calculation of temperature fields induced by laser exposure.  The appropriate regime of laser processing without surface fusion has been selected on the basis of the applied complex. The possibility of displacement in the bottom boundary of α–γ-transformation temperature  for СЧ20 with 900 °С up to 800 °С is confirmed due to preliminary ultrasonic surface plastic deformation of the surface that allows to expand technological opportunities of laser quenching  of gray  cast iron from a solid state. 

  6. Research on ultrasonic vibration aided femtosecond laser machining process of transparent materials

    Science.gov (United States)

    Dai, Yutang; Liu, Bin; Yin, Guanglin; Li, Tao; Karanja, Joseph M.

    2015-08-01

    A new process of femtosecond laser micromachining with ultrasonic vibration aided is proposed. An ultrasonic aided device has been designed, and the laser micromachining experiments of transparent materials have been carried out. The effects of the ultrasonic vibration with different power on surface quality and the drilling depth have been investigated, and the mechanism of the ultrasonic vibration aided laser machining has been analyzed. After introducing the ultrasonic vibration device, the residue debris on surface of the ablated trench is significantly reduced, and the drilling depth is increased. These results show that, ultrasonic vibration can effectively improve the surface quality of material processing, increase the depth of the drilling hole and promote the processing efficiency of the femtosecond laser.

  7. Capacitive Micromachined Ultrasonic Transducers for Therapeutic Ultrasound Applications

    Science.gov (United States)

    Wong, Serena H.; Kupnik, Mario; Watkins, Ronald D.; Butts-Pauly, Kim; Khuri-Yakub, Butrus T.

    2014-01-01

    Therapeutic ultrasound guided by magnetic resonance imaging (MRI) is a noninvasive treatment that potentially reduces mortality, lowers medical costs, and widens accessibility of treatments for patients. Recent developments in the design and fabrication of capacitive micromachined ultrasonic transducers (CMUTs) have made them competitive with piezoelectric transducers for use in therapeutic ultrasound applications. In this paper, we present the first designs and prototypes of an 8-element, concentric-ring, CMUT array to treat upper abdominal cancers. This array was simulated and designed to focus 30–50 mm into tissue and ablate a 2–3 cm diameter tumor within 1 hour. Assuming a surface acoustic output pressure of 1 MPa peak to peak (8.5 W/cm2) at 2.5 MHz, we simulated an array that produced a focal intensity of 680 W/cm2 when focusing to 35 mm. CMUT cells were then designed to meet these frequency and surface acoustic intensity specifications. These cell designs were fabricated as 2.5 mm by 2.5 mm test transducers and used to verify our models. The test transducers were shown to operate at 2.5 MHz with an output pressure of 1.4 MPa peak to peak (16.3 W/cm2). With this CMUT cell design, we fabricated a full 8-element array. Due to yield issues, we only developed electronics to focus the four center elements of the array. The beam profile of the measured array deviated from the simulated because of crosstalk effects; the beamwidth matched within 10% and sidelobes increased by 2 times, which caused the measured gain to be 16.6 compared to 27.4. PMID:19628448

  8. Dual axis operation of a micromachined rate gyroscope

    Energy Technology Data Exchange (ETDEWEB)

    Juneau, T. [BSAC, Berkeley, CA (United States); Pisano, A.P. [Univ. California, Berkeley, CA (United States). Dept. of Mechanical Engineering; Smith, J. [Sandia National Lab., Albuquerque, NM (United States)

    1997-04-01

    Since micromachining technology has raised the prospect of fabricating high performance sensors without the associated high cost and large size, many researchers have investigated micromachined rate gyroscopes. The vast majority of research has focused on single input axis rate gyroscopes, but this paper presents work on a dual input axis micromachined rate gyroscope. The key to successful simultaneous dual axis operation is the quad symmetry of the circular oscillating rotor design. Untuned gyroscopes with mismatched modes yielded random walk as low as 10{degrees}/{radical}hour with cross sensitivity ranging from 6% to 16%. Mode frequency matching via electrostatic tuning allowed performance better than 2{degrees}/{radical}hour, but at the expense of excessive cross sensitivity.

  9. Development of Micromachine Gas Turbine for Portable Power Generation

    Science.gov (United States)

    Isomura, Kousuke; Tanaka, Shuji; Togo, Shinichi; Kanebako, Hideki; Murayama, Motohide; Saji, Nobuyoshi; Sato, Fumihiro; Esashi, Masayoshi

    Micromachine gas turbine with centrifugal impellers of 10mm diameter fabricated by 5-axis micro-milling is under development at Tohoku University, in conjunction with Ishikawajima-Harima Heavy Industries Co., Ltd. (IHI), Tohoku-Gakuin University, and Sankyo Seiki Mfg. Co., Ltd. The development is currently at the stage of proving the feasibility of the gas turbine cycle by component tests. Micro-combustors have been developed for both hydrogen and methane fuel. Over 99.9% of the combustion efficiency has been realized in both combustors and the baseline configuration of the combustor for the gas turbine is set. A compressor of 10mm diameter has been developed as a micromachined turbocharger. The performance test of the micromachined turbocharger has been started, and ran up to 566000rpm, which is approximately 65% of the design speed. Compressor performance has been successfully measured along a constant speed line at 55% of the design speed.

  10. Diffusion processes in bombardment-induced surface topography

    International Nuclear Information System (INIS)

    Robinson, R.S.

    1984-01-01

    The bombardment of surfaces with moderate energy ions can lead to the development of various micron-sized surface structures. These structures include ridges, ledges, flat planes, pits and cones. The causal phenomena in the production of these features are sputtering, ion reflection, redeposition of sputtered material, and surface diffusion of both impurity and target-atom species. The authors concentrate on the formation of ion bombardment-induced surface topography wherein surface diffusion is a dominant process. The most thoroughly understood aspect of this topography development is the generation of cone-like structures during sputtering. The formation of cones during sputtering has been attributed to three effects. These are: (1) the presence of asperities, defects, or micro-inclusions in the surface layers, (2) the presence of impurities on the surfaces, and (3) particular crystal orientations. (Auth.)

  11. An integrated approach to friction surfacing process optimisation

    OpenAIRE

    Voutchkov, I.I.; Jaworski, B.; Vitanov, V.I.; Bedford, G.M.

    2001-01-01

    This paper discusses the procedures for data collection, management and optimisation of the friction surfacing process. Experimental set-up and characteristics of measuring equipment are found to match the requirements for accurate and unbiased data signals. The main friction surfacing parameters are identified and the first stage of the optimisation process is achieved by visually assessing the coatings and introducing the substrate speed vs. force map. The optimum values from this first sta...

  12. Monolithic Micromachined Quartz Resonator based Infrared Focal Plane Arrays

    Science.gov (United States)

    2012-05-05

    prototypes of integrated micromachined IR detectors consisting of 200 μm diameter QCM resonators, 241 MHz (6.9 μm) thick 5 x 5 resonator arrays from Y-cut...of small QCM devices. • A novel measurement method for the real-time tracking of the resonance frequency based on impedance measurement around the...miniaturize QCM ? • Micromachining Quartz • Evaluation of QCM MicroArrays • Adsorption Experiments – Human Serum Albumin, IgG, and Human Fibrinogen Adsorption

  13. Wideband acoustic activation and detection of droplet vaporization events using a capacitive micromachined ultrasonic transducer

    Science.gov (United States)

    Novell, Anthony; Arena, Christopher B.; Oralkan, Omer; Dayton, Paul A.

    2016-01-01

    An ongoing challenge exists in understanding and optimizing the acoustic droplet vaporization (ADV) process to enhance contrast agent effectiveness for biomedical applications. Acoustic signatures from vaporization events can be identified and differentiated from microbubble or tissue signals based on their frequency content. The present study exploited the wide bandwidth of a 128-element capacitive micromachined ultrasonic transducer (CMUT) array for activation (8 MHz) and real-time imaging (1 MHz) of ADV events from droplets circulating in a tube. Compared to a commercial piezoelectric probe, the CMUT array provides a substantial increase of the contrast-to-noise ratio. PMID:27369143

  14. In-plane diffraction loss free optical cavity using coated optical fiber and silicon micromachined spherical mirror

    Science.gov (United States)

    Sabry, Yasser; Bourouina, Tarik; Saadany, Bassam; Khalil, Diaa

    2013-03-01

    Light trapping in optical cavities has many applications in optical telecommunications, biomedical optics, atomic studies, and chemical analysis. Efficient optical coupling in these cavities is an important engineering problem that affects greatly the cavity performance. One interesting way to form an optical cavity, while simultaneously connected to the rest of the optical systems, is to use an optical fiber surface as one of the cavity mirrors while the second mirror is fabricated by MEMS technology. In this way, cavity tuning with a MEMS actuator is a simple achievable task with low cost in mass production. The main problem in this solution is the high diffraction loss associated with the small spot size at the output of the standard single-mode fiber (SMF). Diffraction loss in the cavity is usually overcome by using an expensive lensed fiber or by inserting a coated lens in the cavity leading to a long cavity with small free spectral range (FSR). In this work, we report a Fabry-Perot cavity formed by a multilayer-coated cleaved-surface SMF inserted into a grove while facing a spherical micromirror; both are fabricated by silicon micromachining. The light is trapped inside the cavity while propagating in-plane of the wafer substrate. The light is injected in and collected from a Corning SMF-28 optical fiber with a coated surface reflectivity of about 98% at 1330 nm (O-band). The silicon mirror surface is aluminum metalized with a reflectivity of about 92%. The measured cavity has a line width of 0.45 nm around 1330 nm with a FSR of 26 nm. The obtained results indicate an almost diffraction-loss free optical cavity with a quality factor close to 3000, limited by the optical surfaces reflectivity that can be improved in future by an optimized mirror fabrication process and better matching of the fiber multilayer coating.

  15. Surface processing for bulk niobium superconducting radio frequency cavities

    Science.gov (United States)

    Kelly, M. P.; Reid, T.

    2017-04-01

    The majority of niobium cavities for superconducting particle accelerators continue to be fabricated from thin-walled (2-4 mm) polycrystalline niobium sheet and, as a final step, require material removal from the radio frequency (RF) surface in order to achieve performance needed for use as practical accelerator devices. More recently bulk niobium in the form of, single- or large-grain slices cut from an ingot has become a viable alternative for some cavity types. In both cases the so-called damaged layer must be chemically etched or electrochemically polished away. The methods for doing this date back at least four decades, however, vigorous empirical studies on real cavities and more fundamental studies on niobium samples at laboratories worldwide have led to seemingly modest improvements that, when taken together, constitute a substantial advance in the reproducibility for surface processing techniques and overall cavity performance. This article reviews the development of niobium cavity surface processing, and summarizes results of recent studies. We place some emphasis on practical details for real cavity processing systems which are difficult to find in the literature but are, nonetheless, crucial for achieving the good and reproducible cavity performance. New approaches for bulk niobium surface treatment which aim to reduce cost or increase performance, including alternate chemical recipes, barrel polishing and ‘nitrogen doping’ of the RF surface, continue to be pursued and are closely linked to the requirements for surface processing.

  16. Surface engineering of glazing materials and structures using plasma processes

    International Nuclear Information System (INIS)

    Anders, Andre; Monteiro, Othon R.

    2003-01-01

    A variety of coatings is commercially produced on a very large scale, including transparent conducting oxides and multi-layer silver-based low-emissivity and solar control coatings. A very brief review of materials and manufacturing process is presented and illustrated by ultrathin silver films and chevron copper films. Understanding the close relation between manufacturing processes and bulk and surface properties of materials is crucial for film growth and self-assembly processes

  17. Unveiling the wet chemical etching characteristics of polydimethylsiloxane film for soft micromachining applications

    International Nuclear Information System (INIS)

    Kakati, A; Maji, D; Das, S

    2017-01-01

    Micromachining of a polydimethylsiloxane (PDMS) microstructure by wet chemical etching is explored for microelectromechanical systems (MEMS) and microfluidic applications. A 100 µ m thick PDMS film was patterned with different microstructure designs by wet chemical etching using a N-methyl-2-pyrrolidone (C 16 H 36 FN) and tetra-n-butylammonium fluoride (C 5 H 9 NO) mixture solution with 3:1 volume ratio after lithography for studying etching characteristics. The patterning parameters, such as etch rate, surface roughness, pH of etchant solution with time, were thoroughly investigated. A detailed study of surface morphology with etching time revealed nonlinear behaviour of the PDMS surface roughness and etch rate. A maximum rate of 1.45 µ m min −1 for 10 min etching with surface roughness of 360 nm was achieved. A new approach of wet chemical etching with pH controlled doped etchant was introduced for lower surface roughness of etched microstructures, and a constant etch rate during etching. Variation of the etching rate and surface roughness by pH controlled etching was performed by doping 5–15 gm l −1 of silicic acid (SiO 2xH2 O) into the traditional etchant solution. PDMS etching by silicic acid doped etchant solution showed a reduction in surface roughness from 400 nm to 220 nm for the same 15 µ m etching. This study is beneficial for micromachining of various MEMS and microfluidic structures such as micropillars, microchannels, and other PDMS microstructures. (paper)

  18. Representing Global Reactive Potential Energy Surfaces Using Gaussian Processes.

    Science.gov (United States)

    Kolb, Brian; Marshall, Paul; Zhao, Bin; Jiang, Bin; Guo, Hua

    2017-04-06

    Representation of multidimensional global potential energy surfaces suitable for spectral and dynamical calculations from high-level ab initio calculations remains a challenge. Here, we present a detailed study on constructing potential energy surfaces using a machine learning method, namely, Gaussian process regression. Tests for the 3 A″ state of SH 2 , which facilitates the SH + H ↔ S( 3 P) + H 2 abstraction reaction and the SH + H' ↔ SH' + H exchange reaction, suggest that the Gaussian process is capable of providing a reasonable potential energy surface with a small number (∼1 × 10 2 ) of ab initio points, but it needs substantially more points (∼1 × 10 3 ) to converge reaction probabilities. The implications of these observations for construction of potential energy surfaces are discussed.

  19. Surface topography of parallel grinding process for nonaxisymmetric aspheric lens

    International Nuclear Information System (INIS)

    Zhang Ningning; Wang Zhenzhong; Pan Ri; Wang Chunjin; Guo Yinbiao

    2012-01-01

    Workpiece surface profile, texture and roughness can be predicted by modeling the topography of wheel surface and modeling kinematics of grinding process, which compose an important part of precision grinding process theory. Parallel grinding technology is an important method for nonaxisymmetric aspheric lens machining, but there is few report on relevant simulation. In this paper, a simulation method based on parallel grinding for precision machining of aspheric lens is proposed. The method combines modeling the random surface of wheel and modeling the single grain track based on arc wheel contact points. Then, a mathematical algorithm for surface topography is proposed and applied in conditions of different machining parameters. The consistence between the results of simulation and test proves that the algorithm is correct and efficient. (authors)

  20. Development of a focused ion beam micromachining system

    Energy Technology Data Exchange (ETDEWEB)

    Pellerin, J.G.; Griffis, D.; Russell, P.E.

    1988-12-01

    Focused ion beams are currently being investigated for many submicron fabrication and analytical purposes. An FIB micromachining system consisting of a UHV vacuum system, a liquid metal ion gun, and a control and data acquisition computer has been constructed. This system is being used to develop nanofabrication and nanomachining techniques involving focused ion beams and scanning tunneling microscopes.

  1. Micromachined palladium silver alloy membranes for hydrogen separation

    NARCIS (Netherlands)

    Tong, D.H.; Gielens, F.C.; Berenschot, Johan W.; de Boer, Meint J.; Gardeniers, Johannes G.E.; Jansen, Henricus V.; Nijdam, W.; van Rijn, C.J.M.; Elwenspoek, Michael Curt

    2002-01-01

    This paper presents wafer-scale palladium - silver alloy membranes, fabricated with a sequence of wellknown thin film and silicon micromachining techniques. The membranes have been tested in a gas permeation system to determine the hydrogen permeability and hydrogen selectivity. Typical flow rates

  2. Monitoring of yeast cell concentration using a micromachined impedance sensor

    NARCIS (Netherlands)

    Krommenhoek, E.E.; Gardeniers, Johannes G.E.; Bomer, Johan G.; van den Berg, Albert; Li, X.; Ottens, M.; van der Wielen, L.A.M.; van Dedem, G.W.K.; van Leeuwen, M.; van Gulik, W.M.; Heijnen, J.J.

    2005-01-01

    The paper describes the design, modelling and experimental characterization of a micromachined impedance sensor for on-line monitoring of the viable yeast cell concentration (biomass) in a miniaturized cell assay. Measurements in a Saccharomyces cerevisiae cell culture show that the permittivity of

  3. Measurement of surface crack length using image processing technology

    International Nuclear Information System (INIS)

    Nahm, Seung Hoon; Kim, Si Cheon; Kim, Yong Il; Ryu, Dae Hyun

    2001-01-01

    The development of a new experimental method is required to easily observe the growth behavior of fatigue cracks. To satisfy the requirement, an image processing technique was introduced to fatigue testing. The length of surface fatigue crack could be successfully measured by the image processing system. At first, the image data of cracks were stored into the computer while the cyclic loading was interrupted. After testing, crack length was determined using image processing software which was developed by ourselves. Block matching method was applied to the detection of surface fatigue cracks. By comparing the data measured by image processing system with the data measured by manual measurement with a microscope, the effectiveness of the image processing system was established. If the proposed method is used to monitor and observe the crack growth behavior automatically, the time and efforts for fatigue test could be dramatically reduced

  4. Plasma Processing with Fluorine Chemistry for Modification of Surfaces Wettability

    Directory of Open Access Journals (Sweden)

    Veronica Satulu

    2016-12-01

    Full Text Available Using plasma in conjunction with fluorinated compounds is widely encountered in material processing. We discuss several plasma techniques for surface fluorination: deposition of fluorocarbon thin films either by magnetron sputtering of polytetrafluoroethylene targets, or by plasma-assisted chemical vapor deposition using tetrafluoroethane as a precursor, and modification of carbon nanowalls by plasma treatment in a sulphur hexafluoride environment. We showed that conformal fluorinated thin films can be obtained and, according to the initial surface properties, superhydrophobic surfaces can be achieved.

  5. Surfaces: processing, coating, decontamination, pollution, etc. Surface mastering to prevent component corrosion

    International Nuclear Information System (INIS)

    Foucault, M.

    2012-01-01

    In the primary and secondary circuits of nuclear Pressurized Water Reactors, AREVA uses several nickel-based alloys or austenitic stainless steels for the manufacture of safety components. The experience feedback of the last twenty years allows us to point out the major role hold by the component surface state in their life duration. In this paper, we present four examples of problem encountered and solved by a surface study and the definition and implementation of processes for the surface control of the repaired components. Then, we propose some ideas about the present needs in term of analysis means to improve the surface knowledge and control of the manufactured components. (author)

  6. High surface area carbon and process for its production

    Energy Technology Data Exchange (ETDEWEB)

    Romanos, Jimmy; Burress, Jacob; Pfeifer, Peter; Rash, Tyler; Shah, Parag; Suppes, Galen

    2016-12-13

    Activated carbon materials and methods of producing and using activated carbon materials are provided. In particular, biomass-derived activated carbon materials and processes of producing the activated carbon materials with prespecified surface areas and pore size distributions are provided. Activated carbon materials with preselected high specific surface areas, porosities, sub-nm (<1 nm) pore volumes, and supra-nm (1-5 nm) pore volumes may be achieved by controlling the degree of carbon consumption and metallic potassium intercalation into the carbon lattice during the activation process.

  7. Monolithic integration of micromachined sensors and CMOS circuits based on SOI technologies

    International Nuclear Information System (INIS)

    Yu Xiaomei; Tang Yaquan; Zhang Haitao

    2008-01-01

    This note presents a novel way to monolithically integrate micro-cantilever sensors and signal conditioning circuits by combining SOI CMOS and SOI micromachining technologies. In order to improve the sensor performance and reduce the system volume, an integrated sensor system composed of a piezoresistive cantilever array, a temperature-compensation current reference, a digitally controlled multiplexer and an instrument amplifier is designed and finally fabricated. A post-SOI CMOS process is developed to realize the integrated sensor system which is based on a standard CMOS process with one more mask to define the cantilever structure at the end of the process. Measurements on the finished SOI CMOS devices and circuits show that the integration process has good compatibility both for the cantilever sensors and for the CMOS circuits, and the SOI CMOS integration process can decrease about 25% sequences compared with the bulk silicon CMOS process. (note)

  8. Monitoring tablet surface roughness during the film coating process

    DEFF Research Database (Denmark)

    Seitavuopio, Paulus; Heinämäki, Jyrki; Rantanen, Jukka

    2006-01-01

    the process of film coating tablets were studied by noncontact laser profilometry and scanning electron microscopy (SEM). An EDX analysis was used to monitor the magnesium stearate and titanium dioxide of the tablets. The tablet cores were film coated with aqueous hydroxypropyl methylcellulose, and the film......The purpose of this study was to evaluate the change of surface roughness and the development of the film during the film coating process using laser profilometer roughness measurements, SEM imaging, and energy dispersive X-ray (EDX) analysis. Surface roughness and texture changes developing during...... coating was performed using an instrumented pilot-scale side-vented drum coater. The SEM images of the film-coated tablets showed that within the first 30 minutes, the surface of the tablet cores was completely covered with a thin film. The magnesium signal that was monitored by SEM-EDX disappeared after...

  9. EXPERIMENTAL VALIDATION OF CUMULATIVE SURFACE LOCATION ERROR FOR TURNING PROCESSES

    Directory of Open Access Journals (Sweden)

    Adam K. Kiss

    2016-02-01

    Full Text Available The aim of this study is to create a mechanical model which is suitable to investigate the surface quality in turning processes, based on the Cumulative Surface Location Error (CSLE, which describes the series of the consecutive Surface Location Errors (SLE in roughing operations. In the established model, the investigated CSLE depends on the currently and the previously resulted SLE by means of the variation of the width of cut. The phenomenon of the system can be described as an implicit discrete map. The stationary Surface Location Error and its bifurcations were analysed and flip-type bifurcation was observed for CSLE. Experimental verification of the theoretical results was carried out.

  10. Regionalization and parameterization of hydrological processes at the land surface

    NARCIS (Netherlands)

    Dolman, A.J.; Kabat, P.; Elbers, J.A.; Bastiaanssen, W.G.M.; Ogink-Hendriks, M.J.

    1995-01-01

    Hydrological processes on the land surface play a critical role in physically based hydrological and atmospheric modelling. A series of experiments have been initiated to test and develop parametrizations of spatial heterogeneity on the full range of spatial and temporal scales considered relevant.

  11. Sunspot Groups as Tracers of Sub-Surface Processes

    Indian Academy of Sciences (India)

    2016-01-27

    Jan 27, 2016 ... Data on sunspot groups have been quite useful for obtaining clues to several processes on global and local scales within the sun which lead to emergence of toroidal magnetic flux above the sun's surface. I present here a report on such studies carried out at Indian Institute of Astrophysics during the last ...

  12. Sunspot Groups as Tracers of Sub Surface Processes .

    Indian Academy of Sciences (India)

    tribpo

    Abstract. Data on sunspot groups have been quite useful for obtaining clues to several processes on global and local scales within the sun which lead to emergence of toroidal magnetic flux above the sun's surface. I present here a report on such studies carried out at Indian Institute of. Astrophysics during the last decade or ...

  13. The esa earth explorer land surface processes and interactions mission

    Science.gov (United States)

    Labandibar, Jean-Yves; Jubineau, Franck; Silvestrin, Pierluigi; Del Bello, Umberto

    2017-11-01

    The European Space Agency (ESA) is defining candidate missions for Earth Observation. In the class of the Earth Explorer missions, dedicated to research and pre-operational demonstration, the Land Surface Processes and Interactions Mission (LSPIM) will acquire the accurate quantitative measurements needed to improve our understanding of the nature and evolution of biosphere-atmosphere interactions and to contribute significantly to a solution of the scaling problems for energy, water and carbon fluxes at the Earth's surface. The mission is intended to provide detailed observations of the surface of the Earth and to collect data related to ecosystem processes and radiation balance. It is also intended to address a range of issues important for environmental monitoring, renewable resources assessment and climate models. The mission involves a dedicated maneuvering satellite which provides multi-directional observations for systematic measurement of Land Surface BRDF (BiDirectional Reflectance Distribution Function) of selected sites on Earth. The satellite carries an optical payload : PRISM (Processes Research by an Imaging Space Mission), a multispectral imager providing reasonably high spatial resolution images (50 m over 50 km swath) in the whole optical spectral domain (from 450 nm to 2.35 μm with a resolution close to 10 nm, and two thermal bands from 8.1 to 9.1 μm). This paper presents the results of the Phase A study awarded by ESA, led by ALCATEL Space Industries and concerning the design of LSPIM.

  14. Surface modification of magnesium hydroxide using vinyltriethoxysilane by dry process

    Energy Technology Data Exchange (ETDEWEB)

    Lan, Shengjie [Qinghai Institute of Salt Lakes, Chinese Academy of Sciences, Xining 810008 (China); Key Laboratory of Comprehensive and Highly Efficient Utilization of Salt Lake Resources, Chinese Academy of Sciences, Xining 810008 (China); University of Chinese Academy of Sciences, Beijing 100049 (China); Li, Lijuan, E-mail: lilj@isl.ac.cn [Qinghai Institute of Salt Lakes, Chinese Academy of Sciences, Xining 810008 (China); Key Laboratory of Comprehensive and Highly Efficient Utilization of Salt Lake Resources, Chinese Academy of Sciences, Xining 810008 (China); Xu, Defang; Zhu, Donghai; Liu, Zhiqi; Nie, Feng [Qinghai Institute of Salt Lakes, Chinese Academy of Sciences, Xining 810008 (China); Key Laboratory of Comprehensive and Highly Efficient Utilization of Salt Lake Resources, Chinese Academy of Sciences, Xining 810008 (China)

    2016-09-30

    Highlights: • A modification mechanism for magnesium hydroxide using silane by dry process was proposed. • Si−O−Mg bonds were formed directly by the reaction between Si-OC{sub 2}H{sub 5} and hydroxyl groups of magnesium hydroxide. • Dispersibility and compatibility of modified magnesium hydroxide improved in organic phase. - Abstract: In order to improve the compatibility between magnesium hydroxide (MH) and polymer matrix, the surface of MH was modified using vinyltriethoxysilane (VTES) by dry process and the interfacial interaction between MH and VTES was also studied. Zeta potential measurements implied that the MH particles had better dispersion and less aggregation after modification. Sedimentation tests showed that the surface of MH was transformed from hydrophilic to hydrophobic, and the dispersibility and the compatibility of MH particles significantly improved in the organic phase. Scanning electronic microscopy (SEM), Transmission electron microscopy (TEM) and X-ray powder diffraction (XRD) analyses showed that a thin layer had formed on the surface of the modified MH, but did not alter the material’s crystalline phase. Fourier transform infrared (FT-IR) spectra, X-ray photoelectron spectra (XPS) and Thermogravimetric analysis (TGA) showed that the VTES molecules bound strongly to the surface of MH after modification. Chemical bonds (Si−O−Mg) formed by the reaction between Si-OC{sub 2}H{sub 5} and hydroxyl group of MH, also there have physical adsorption effect in the interface simultaneously. A modification mechanism of VTES on the MH surface by dry process was proposed, which different from the modification mechanism by wet process.

  15. DETECTING GLASS SURFACE CORROSION WITH IMAGE PROCESSING TECHNIQUE

    Directory of Open Access Journals (Sweden)

    Rafet AKDENİZ

    2012-12-01

    Full Text Available Glass is a kind of amorphous materials that exhibits a transition from rigid to viscous state and finally liquid state when heated. For daily usage, it is desirable to have different forms and differenttransparencies for different purposes. Most widely used one is the one with high transparency and flat surface.One of the detrimental effects that glass is undergone during the storage or usage periods is corrosion. In this work, a way for detecting corrosion on the glass surface by image processing methodis presented.

  16. Electronic dissipation processes during chemical reactions on surfaces

    CERN Document Server

    Stella, Kevin

    2012-01-01

    Hauptbeschreibung Every day in our life is larded with a huge number of chemical reactions on surfaces. Some reactions occur immediately, for others an activation energy has to be supplied. Thus it happens that though a reaction should thermodynamically run off, it is kinetically hindered. Meaning the partners react only to the thermodynamically more stable product state within a mentionable time if the activation energy of the reaction is supplied. With the help of catalysts the activation energy of a reaction can be lowered. Such catalytic processes on surfaces are widely used in industry. A

  17. Development of sustainable paper coatings using nanoscale industrial surface processing

    DEFF Research Database (Denmark)

    Markert, Frank; Breedveld, Leo; Lahti, Johanna

    to inform the public about the processes and benefits of the prototype products, and partly to give feedback to the project partners on the environmental and safety aspects of the different material, processing, use and waste stages. By that being a link between the industrial project partners developing...... products, and the process and material developers providing new coatings with specific properties. The combination of RA and LCA/LCC within the early stages of product development provide a more holistic approach, It is commonly believed to be also economical beneficial as changes are easier to implement...... developers, production industries, consumers and authorities. Part of the consideration is the public perception of the new product and the processes to manufacture it, which is an important aspect for products being developed using nanoscale surface processing. Such considerations are integrated...

  18. Study of ablation on surfaces of nuclear-use metals irradiated with Femtosecond laser

    Energy Technology Data Exchange (ETDEWEB)

    Nogueira, Alessandro F.; Samad, Ricardo E.; Vieira Junior, Nilson D.; Rossi, Wagner de, E-mail: alessandro.nogueira@usp.br, E-mail: resamad@ipen.br [Centro Tecnologico da Marinha em Sao Paulo (CTMSP), Sorocaba, SP (Brazil); Faculdade de Engenharia de Sorocaba (FACENS), Ipero, SP (Brazil); Instituto de Pesquisas Energeticas e Nucleares (IPEN/CNEN-SP), Sao Paulo, SP (Brazil)

    2017-11-01

    The use of ultrashort pulsed lasers is an alternative for micro-machining in metal surfaces, with diverse applications in several industrial areas, such as aeronautics, aerospace, naval, nuclear, among others, where there is a growing concern with reliability in service. In this work, micro-machining were performed on titanium surfaces using femtosecond ultrashort pulses. Such a process resulted in minimal heat transfer to the material, thus avoiding and surface deformation of the titanium plate and the formation of resolidified material in the ablated region, which are drawbacks present in the use of the long pulsed keyed laser of the order of nanoseconds. Three types of micro-machining were performed, with variations in the distances between the machined lines. It was also verified that the wettability increases when there is an increase in the distance between machined lines. Finally, in order to change the surface with minimal removal of material, it has been found that the use of ultra-short pulse lasers provide great benefits for the integrity of the ablated material. This initial study is the starting point for the study of other metals, such as Maraging Steels and Zircaloy that will be the target of future work. (author)

  19. Study of ablation on surfaces of nuclear-use metals irradiated with Femtosecond laser

    International Nuclear Information System (INIS)

    Nogueira, Alessandro F.; Samad, Ricardo E.; Vieira Junior, Nilson D.; Rossi, Wagner de

    2017-01-01

    The use of ultrashort pulsed lasers is an alternative for micro-machining in metal surfaces, with diverse applications in several industrial areas, such as aeronautics, aerospace, naval, nuclear, among others, where there is a growing concern with reliability in service. In this work, micro-machining were performed on titanium surfaces using femtosecond ultrashort pulses. Such a process resulted in minimal heat transfer to the material, thus avoiding and surface deformation of the titanium plate and the formation of resolidified material in the ablated region, which are drawbacks present in the use of the long pulsed keyed laser of the order of nanoseconds. Three types of micro-machining were performed, with variations in the distances between the machined lines. It was also verified that the wettability increases when there is an increase in the distance between machined lines. Finally, in order to change the surface with minimal removal of material, it has been found that the use of ultra-short pulse lasers provide great benefits for the integrity of the ablated material. This initial study is the starting point for the study of other metals, such as Maraging Steels and Zircaloy that will be the target of future work. (author)

  20. Millimeter length micromachining using a heavy ion nuclear microprobe with standard magnetic scanning

    Energy Technology Data Exchange (ETDEWEB)

    Nesprías, F. [Gerencia de Investigación y Aplicaciones, Comisión Nacional de Energía Atómica, Av. Gral Paz 1499 (1650), San Martín, Buenos Aires (Argentina); Debray, M.E., E-mail: debray@tandar.cnea.gov.ar [Gerencia de Investigación y Aplicaciones, Comisión Nacional de Energía Atómica, Av. Gral Paz 1499 (1650), San Martín, Buenos Aires (Argentina); Escuela de Ciencia y Tecnología. Universidad Nacional de Gral. San Martín, M. De Irigoyen 3100 (1650), San Martín, Buenos Aires (Argentina); Davidson, J. [Gerencia de Investigación y Aplicaciones, Comisión Nacional de Energía Atómica, Av. Gral Paz 1499 (1650), San Martín, Buenos Aires (Argentina); CONICET, Avda. Rivadavia 1917 (C1033AAJ), Ciudad Autónoma de Buenos Aires (Argentina); Kreiner, A.J. [Gerencia de Investigación y Aplicaciones, Comisión Nacional de Energía Atómica, Av. Gral Paz 1499 (1650), San Martín, Buenos Aires (Argentina); Escuela de Ciencia y Tecnología. Universidad Nacional de Gral. San Martín, M. De Irigoyen 3100 (1650), San Martín, Buenos Aires (Argentina); CONICET, Avda. Rivadavia 1917 (C1033AAJ), Ciudad Autónoma de Buenos Aires (Argentina); and others

    2013-04-01

    In order to increase the scanning length of our microprobe, we have developed an irradiation procedure suitable for use in any nuclear microprobe, extending at least up to 400% the length of our heavy ion direct writing facility using standard magnetic exploration. Although this method is limited to patterns of a few millimeters in only one direction, it is useful for the manufacture of curved waveguides, optical devices such Mach–Zehnder modulators, directional couplers as well as channels for micro-fluidic applications. As an example, this technique was applied to the fabrication of 3 mm 3D-Mach–Zehnder modulators in lithium niobate with short Y input/output branches and long shaped parallel-capacitor control electrodes. To extend and improve the quality of the machined structures we developed new scanning control software in LabView™ platform. The new code supports an external dose normalization, electrostatic beam blanking and is capable of scanning figures at 16 bit resolution using a National Instruments™ PCI-6731 High-Speed I/O card. A deep and vertical micromachining process using swift {sup 35}Cl ions 70 MeV bombarding energy and direct write patterning was performed on LiNbO{sub 3}, a material which exhibits a strong natural anisotropy to conventional etching. The micromachined structures show the feasibility of this method for manufacturing micro-fluidic channels as well.

  1. Technology trends in high temperature pressure transducers: The impact of micromachining

    Science.gov (United States)

    Mallon, Joseph R., Jr.

    1992-01-01

    This paper discusses the implications of micromachining technology on the development of high temperature pressure transducers. The introduction puts forth the thesis that micromachining will be the technology of choice for the next generation of extended temperature range pressure transducers. The term micromachining is defined, the technology is discussed and examples are presented. Several technologies for high temperature pressure transducers are discussed, including silicon on insulator, capacitive, optical, and vibrating element. Specific conclusions are presented along with recommendations for development of the technology.

  2. One-step electrodeposition process to fabricate cathodic superhydrophobic surface

    Energy Technology Data Exchange (ETDEWEB)

    Chen Zhi, E-mail: c2002z@nwpu.edu.cn [Department of Applied Physics, Northwestern Polytechnical University, Xi' an 710129 (China); Li Feng [Department of Applied Physics, Northwestern Polytechnical University, Xi' an 710129 (China); Hao Limei [Department of Applied Physics, Xi' an University of Science and Technology, Xi' an 710054 (China); Chen Anqi; Kong Youchao [Department of Applied Physics, Northwestern Polytechnical University, Xi' an 710129 (China)

    2011-12-01

    In this work, a rapid one-step process is developed to fabricate superhydrophobic cathodic surface by electrodepositing copper plate in an electrolyte solution containing manganese chloride (MnCl{sub 2}{center_dot}4H{sub 2}O), myristic acid (CH{sub 3}(CH{sub 2}){sub 12}COOH) and ethanol. The superhydrophobic surfaces were characterized by means of scanning electron microscopy (SEM), and Fourier transform infrared spectroscopy (FTIR) and X-ray diffraction (XRD). The shortest electrolysis time for fabricating a superhydrophobic surface is about 1 min, the measured maximum contact angle is 163 Degree-Sign and rolling angle is less than 3 Degree-Sign . Furthermore, this method can be easily extended to other conductive materials. The approach is time-saving and cheap, and it is supposed to have a promising future in industrial fields.

  3. Capacitive Micromachined Ultrasonic Transducers (CMUTs for Underwater Imaging Applications

    Directory of Open Access Journals (Sweden)

    Jinlong Song

    2015-09-01

    Full Text Available A capacitive micromachined ultrasonic transducer structure for use in underwater imaging is designed, fabricated and tested in this paper. In this structure, a silicon dioxide insulation layer is inserted between the top electrodes and the vibration membrane to prevent ohmic contact. The capacitance-voltage (C-V characteristic curve shows that the transducer offers suitable levels of hysteresis and repeatability performance. The −6 dB center frequency is 540 kHz and the transducer has a bandwidth of 840 kHz for a relative bandwidth of 155%. Underwater pressure of 143.43 Pa is achieved 1 m away from the capacitive micromachined ultrasonic transducer under 20  excitation. Two-dimensional underwater ultrasonic imaging, which is able to prove that a rectangular object is present underwater, is achieved. The results presented here indicate that our work will be highly beneficial for the establishment of an underwater ultrasonic imaging system.

  4. Mechanical and tribological properties of ion beam-processed surfaces

    Energy Technology Data Exchange (ETDEWEB)

    Kodali, Padma [Univ. of Maryland, College Park, MD (United States)

    1998-01-01

    The intent of this work was to broaden the applications of well-established surface modification techniques and to elucidate the various wear mechanisms that occur in sliding contact of ion-beam processed surfaces. The investigation included characterization and evaluation of coatings and modified surfaces synthesized by three surface engineering methods; namely, beam-line ion implantation, plasma-source ion implantation, and DC magnetron sputtering. Correlation among measured properties such as surface hardness, fracture toughness, and wear behavior was also examined. This dissertation focused on the following areas of research: (1) investigating the mechanical and tribological properties of mixed implantation of carbon and nitrogen into single crystal silicon by beam-line implantation; (2) characterizing the mechanical and tribological properties of diamond-like carbon (DLC) coatings processed by plasma source ion implantation; and (3) developing and evaluating metastable boron-carbon-nitrogen (BCN) compound coatings for mechanical and tribological properties. The surface hardness of a mixed carbon-nitrogen implant sample improved significantly compared to the unimplanted sample. However, the enhancement in the wear factor of this sample was found to be less significant than carbon-implanted samples. The presence of nitrogen might be responsible for the degraded wear behavior since nitrogen-implantation alone resulted in no improvement in the wear factor. DLC coatings have low friction, low wear factor, and high hardness. The fracture toughness of DLC coatings has been estimated for the first time. The wear mechanism in DLC coatings investigated with a ruby slider under a contact stress of 1 GPa was determined to be plastic deformation. The preliminary data on metastable BCN compound coatings indicated high friction, low wear factor, and high hardness.

  5. Mechanical and tribological properties of ion beam-processed surfaces

    International Nuclear Information System (INIS)

    Kodali, P.

    1998-01-01

    The intent of this work was to broaden the applications of well-established surface modification techniques and to elucidate the various wear mechanisms that occur in sliding contact of ion-beam processed surfaces. The investigation included characterization and evaluation of coatings and modified surfaces synthesized by three surface engineering methods; namely, beam-line ion implantation, plasma-source ion implantation, and DC magnetron sputtering. Correlation among measured properties such as surface hardness, fracture toughness, and wear behavior was also examined. This dissertation focused on the following areas of research: (1) investigating the mechanical and tribological properties of mixed implantation of carbon and nitrogen into single crystal silicon by beam-line implantation; (2) characterizing the mechanical and tribological properties of diamond-like carbon (DLC) coatings processed by plasma source ion implantation; and (3) developing and evaluating metastable boron-carbon-nitrogen (BCN) compound coatings for mechanical and tribological properties. The surface hardness of a mixed carbon-nitrogen implant sample improved significantly compared to the unimplanted sample. However, the enhancement in the wear factor of this sample was found to be less significant than carbon-implanted samples. The presence of nitrogen might be responsible for the degraded wear behavior since nitrogen-implantation alone resulted in no improvement in the wear factor. DLC coatings have low friction, low wear factor, and high hardness. The fracture toughness of DLC coatings has been estimated for the first time. The wear mechanism in DLC coatings investigated with a ruby slider under a contact stress of 1 GPa was determined to be plastic deformation. The preliminary data on metastable BCN compound coatings indicated high friction, low wear factor, and high hardness

  6. Artificial intelligence: Collective behaviors of synthetic micromachines

    Science.gov (United States)

    Duan, Wentao

    Synthetic nano- and micromotors function through the conversion of chemical free energy or forms of energy into mechanical motion. Ever since the first reports, such motors have been the subject of growing interest. In addition to motility in response to gradients, these motors interact with each other, resulting in emergent collective behavior like schooling, exclusion, and predator-prey. However, most of these systems only exhibit a single type of collective behavior in response to a certain stimuli. The research projects in the disseratation aim at designing synthetic micromotors that can exhibit transition between various collective behaviors in response to different stimuli, as well as quantitative understanding on the pairwise interaction and propulsion mechanism of such motors. Chapter 1 offers an overview on development of synthetic micromachines. Interactions and collective behaviors of micromotors are also summarized and included. Chapter 2 presents a silver orthophosphate microparticle system that exhibits collective behaviors. Transition between two collective patterns, clustering and dispersion, can be triggered by shift in chemical equilibrium upon the addition or removal of ammonia, in response to UV light, or under two orthogonal stimuli (UV and acoustic field) and powering mechanisms. The transitions can be explained by the self-diffusiophoresis mechanism resulting from either ionic or neutral solute gradients. Potential applications of the reported system in logic gates, microscale pumping, and hierarchical assembly have been demonstrated. Chapter 3 introduces a self-powered oscillatory micromotor system in which active colloids form clusters whose size changes periodically. The system consists of an aqueous suspension of silver orthophosphate particles under UV radiation, in the presence of a mixture of glucose and hydrogen peroxide. The colloid particles first attract with each other to form clusters. After a lag time of around 5min, chemical

  7. Application of Anodization Process for Cast Aluminium Surface Properties Enhancement

    Directory of Open Access Journals (Sweden)

    Włodarczyk-Fligier A.

    2016-09-01

    Full Text Available An huge interest is observed in last years in metal matrix composite, mostly light metal based, which have found their applications in many industry branches, among others in the aircraft industry, automotive-, and armaments ones, as well as in electrical engineering and electronics, where one of the most important issue is related to the corrosion resistance, especially on the surface layer of the used aluminium alloys. This elaboration presents the influence of ceramic phase on the corrosion resistance, quality of the surface layer its thickness and structure of an anodic layer formed on aluminium alloys. As test materials it was applied the aluminium alloys Al-Si-Cu and Al-Cu-Mg, for which heat treatment processes and corrosion tests were carried out. It was presented herein grindability test results and metallographic examination, as well. Hardness of the treated alloys with those ones subjected to corrosion process were compared.

  8. Publications of the Western Earth Surface Processes Team 2006

    Science.gov (United States)

    Powell, Charles L.; Stone, Paul

    2007-01-01

    The Western Earth Surface Processes Team (WESPT) of the U.S. Geological Survey (USGS) conducts geologic mapping, earth-surface process investigations, and related topical earth science studies in the western United States. This work is focused on areas where modern geologic maps and associated earth-science data are needed to address key societal and environmental issues such as ground-water quality, landslides and other potential geologic hazards, and land-use decisions. Areas of primary emphasis in 2006 included southern California, the San Francisco Bay region, the Mojave Desert, the Colorado Plateau region of northern Arizona, and the Pacific Northwest. The team has its headquarters in Menlo Park, California, and maintains smaller field offices at several other locations in the western United States. This compilation gives the bibliographical citations for 123 new publications, most of which are available online using the hyperlinks provided.

  9. Micromachined chemical sensor with integrated microelectronics

    International Nuclear Information System (INIS)

    Smith, J.; Sniegowski, J.; Koehler, D.; Ricco, T.; Martin, S.; McWhorter, P.

    1992-01-01

    With today's continued emphasis on environmental safety and health issues, a resurgence of interest has developed in the area of chemical sensors. These sensors would typically be used to monitor contamination hazards such as underground storage tanks or to assess previous contamination at waste disposal sites. Human exposure to chemical hazards can also be monitored. Additionally, these sensors can be used as part of a manufacturing process control loop. One type of sensor suitable for gas phase monitoring of chemicals is the quartz resonator or quartz crystal microbalance (QCM) sensor. In this type of sensor, a thickness shear mode (TSM) quartz resonator is coated with a film that interacts with the chemical species of interest. Changes in the mass and elasticity of this film are reflected as changes in the resonant properties of the device. Therefore, the presence of the species of interest can be detected by monitoring the frequency of an oscillator based on the resonance of the quartz. These QCM sensors compete with surface acoustic wave (SAW) devices as a means for monitoring gas phase species. SAW devices are typically more sensitive to small amounts of a species, but the instrumentation associated with a SAW device is an order of magnitude more expensive than the instrumentation associated with a TSM wave resonator since the SAW devices operate in the 100's of MHz frequency regime while quartz resonators operate in the 5--25 MHz regime. We are working to improve the sensitivity of the QCM sensor by increasing the frequency of the device to 25 MHz (compared to the typical 5 MHz crystal) and by increasing the frequency stability of the system to an ultimate goal of 0.1 Hz. The 25 MHz QCM has already been achieved and once the stability goal is achieved, the QCM will have the same sensitivity as a SAW device

  10. High-speed Laser Micromachining with Copper Bromide Laser

    OpenAIRE

    Balchev, Ivaylo I.; Minkovski, Nikolai I.; Kostadinov, Ivan K.; Sabotinov, Nikola V.

    2006-01-01

    The application of the copper bromide (CuBr) laser as an attractive tool in the micro-machining of different materials has been demonstrated. High-quality drilling by trepanning and precision cutting was established on several materials with a negligible heat-affected zone (HAZ). That good performance was a result of the combination of high power visible radiation, short pulses, and close to the diffraction-limited laser beam quality with high-speed galvo scanner beam steering.

  11. Surface processes during purification of InP quantum dots

    Directory of Open Access Journals (Sweden)

    Natalia Mordvinova

    2014-08-01

    Full Text Available Recently, a new simple and fast method for the synthesis of InP quantum dots by using phosphine as phosphorous precursor and myristic acid as surface stabilizer was reported. Purification after synthesis is necessary to obtain samples with good optical properties. Two methods of purification were compared and the surface processes which occur during purification were studied. Traditional precipitation with acetone is accompanied by a small increase in photoluminescence. It occurs that during the purification the hydrolysis of the indium precursor takes place, which leads to a better surface passivation. The electrophoretic purification technique does not increase luminescence efficiency but yields very pure quantum dots in only a few minutes. Additionally, the formation of In(OH3 during the low temperature synthesis was explained. Purification of quantum dots is a very significant part of postsynthetical treatment that determines the properties of the material. But this subject is not sufficiently discussed in the literature. The paper is devoted to the processes that occur at the surface of quantum dots during purification. A new method of purification, electrophoresis, is investigated and described in particular.

  12. Wright Valley Sediments as Potential Analogs for Martian Surface Processes

    Science.gov (United States)

    Englert, P. A. J.; Bishop, J. L.; Patel, S.; Gibson, E. K.; Koeberl, C.

    2015-12-01

    The Antarctic Dry Valleys (ADV) may provide a unique terrestrial analog for current Martian surface processes. The Wright Valley located in the ADV contains streams, lakes and ponds that host highly saline, sedimentary environments. This project highlights comparisons of formation and salt accumulation processes at the Don Juan Pond (DJP) and Don Quixote Pond (DQP). These are located in the north and south forks of the Wright Valley, which are unique areas where unusual terrestrial processes can be studied. DQP is located in the western part of the north fork about 100 m above mean seawater level. The DQP Valley walls are up to 2500 m high and the brine is seasonally frozen. DJP from the south fork is located ~9 km west of Lake Vanda. The basin floor is 117 m above mean seawater level with activity to the north and south rising above 1000 m. The DJP brine does not freeze and may be a model environment for Ca and Cl weathering and distribution on Mars. Our findings indicate that DJP and DQP have formed in similar climatic and geological environments, but likely experienced different formation conditions. Samples were collected from surface, soil pits and depth profiles during the 1979/1980, the 1990/1991 and the 2005/2006 field seasons. Elemental abundances and mineralogy were evaluated for several sets of sediments. The DJP basin shows low surface abundances of halite and relatively high abundances of sulfates throughout with gypsum or anhydrite dominating at different locations. The DQP area has high surface abundances of halite with gypsum present as the major sulfate. Two models have been proposed to explain these differences: DQP may have formed through a combination of shallow and some deep groundwater influx, while deep groundwater upwelling likely played the dominant role of salt formation at DJP. Our study seeks to understand the formation of DQP and DJP as unique terrestrial processes and as models for Ca, Cl, and S weathering and distribution on Mars.

  13. High lane density slab-gel electrophoresis using micromachined instrumentation.

    Science.gov (United States)

    Papautsky, I; Mohanty, S; Weiss, R; Frazier, A B

    2001-10-01

    In this paper, micromachined pipette arrays (MPAs) and microcombs were studied as a means of enabling high lane density gel electrophoresis. The MPA provide a miniaturized format to interface sub-microliter volumes of samples between macroscale sample preparation formats and microscale biochemical analysis systems. The microcombs provide a means of creating sample loading wells in the gel material on the same center-to-center spacing as the MPAs. Together, the two micromachined instruments provide an alternative to current combs and pipetting technologies used for creating sample loading wells and sample delivery in gel electrophoresis systems. Using three designs for the microcomb-MPA pair, center-to-center spacings of 1.0 mm, 500 microm, and 250 microm are studied. The results demonstrate an approximate 10-fold increase in lane density and a 10-fold reduction in sample size from 5 microL to 500 pL. As a result, the number of theoretical plates has increased 2.5-fold, while system resolution has increased 1.5-fold over the conventional agarose gel systems. An examination of changes in resolution across the width of individual separation lanes in both systems revealed dependence in the case of the conventional gels and no dependence for the gels loaded with the micromachined instrumentation.

  14. Free surface BCP self-assembly process characterization with CDSEM

    Science.gov (United States)

    Levi, Shimon; Weinberg, Yakov; Adan, Ofer; Klinov, Michael; Argoud, Maxime; Claveau, Guillaume; Tiron, Raluca

    2016-03-01

    A simple and common practice to evaluate Block copolymers (BCP) self-assembly performances, is on a free surface wafer. With no guiding pattern the BCP designed to form line space pattern for example, spontaneously rearranges to form a random fingerprint type of a pattern. The nature of the rearrangement is dictated by the physical properties of the BCP moieties, wafer surface treatment and the self-assembly process parameters. Traditional CDSEM metrology algorithms are designed to measure pattern with predefined structure, like linespace or oval via holes. Measurement of pattern with expected geometry can reduce measurement uncertainty. Fingerprint type of structure explored in this dissertation, poses a challenge for CD-SEM measurement uncertainty and offers an opportunity to explore 2D metrology capabilities. To measure this fingerprints we developed a new metrology approach that combines image segmentation and edge detection to measure 2D pattern with arbitrary rearrangement. The segmentation approach enabled to quantify the quality of the BCP material and process, detecting 2D attributes such as: CD and CDU at one axis, and number of intersections, length and number of PS fragments, etched PMMA spaces and donut shapes numbers on the second axis. In this paper we propose a 2D metrology to measure arbitrary BCP pattern on a free surface wafer. We demonstrate experimental results demonstrating precision data, and characterization of PS-b-PMMA BCP, intrinsic period L0 = 38nm (Arkema), processed at different bake time and temperatures.

  15. Surface encapsulation process for managing low-level radioactive wastes

    International Nuclear Information System (INIS)

    Unger, S.L.; Telles, R.W.

    1986-01-01

    Current processes for low-level radioactive waste (LLRW) stabilization involve mixing contaminants with a fixative such as cement, asphalt, polyethylene, or vinyl monomers, and subsequently curing the mixtures in containers. These methods give rise to processing difficulties and yield products lacking performance to assure long-term LLRW immobilization. Mixing of LLRW into fixatives is impeded by viscous media and the curing reaction is inhibited by LLRW constituents. Product performance is affected by corrosion of the containers which ultimately expose the cured mixtures to environmental stresses. This process, termed the ''Surface Encapsulation Process,'' circumvents these problems. A thermosetting fixative is employed that mixes readily with LLRW and is highly insensitive to inhibition in curing. The agglomerated mixtures are further stabilized by encapsulation with seamless jackets of corrosion resistant plastic, such as polyethylene. In laboratory-scale investigations, feasibility of the technique was demonstrated for managing a broad spectrum of LLRW simulants including ion-exchange resins, beads, and glasses, and sodium salts. Products tested to date meet all relevant NRC and DOT regulations governing waste fixation. The high waste loadings of the products, use of commodity resins, and processing simplicity indicated our process would provide high performance LLRW stabilization at costs that are competitive to those for processes employing state-of-the-art fixatives. An economic analysis based on managing LLRW generated by commercial power plants (≅1,000 MeW) substantiates the competitive process costs advantages

  16. Exposing earth surface process model simulations to a large audience

    Science.gov (United States)

    Overeem, I.; Kettner, A. J.; Borkowski, L.; Russell, E. L.; Peddicord, H.

    2015-12-01

    The Community Surface Dynamics Modeling System (CSDMS) represents a diverse group of >1300 scientists who develop and apply numerical models to better understand the Earth's surface. CSDMS has a mandate to make the public more aware of model capabilities and therefore started sharing state-of-the-art surface process modeling results with large audiences. One platform to reach audiences outside the science community is through museum displays on 'Science on a Sphere' (SOS). Developed by NOAA, SOS is a giant globe, linked with computers and multiple projectors and can display data and animations on a sphere. CSDMS has developed and contributed model simulation datasets for the SOS system since 2014, including hydrological processes, coastal processes, and human interactions with the environment. Model simulations of a hydrological and sediment transport model (WBM-SED) illustrate global river discharge patterns. WAVEWATCH III simulations have been specifically processed to show the impacts of hurricanes on ocean waves, with focus on hurricane Katrina and super storm Sandy. A large world dataset of dams built over the last two centuries gives an impression of the profound influence of humans on water management. Given the exposure of SOS, CSDMS aims to contribute at least 2 model datasets a year, and will soon provide displays of global river sediment fluxes and changes of the sea ice free season along the Arctic coast. Over 100 facilities worldwide show these numerical model displays to an estimated 33 million people every year. Datasets storyboards, and teacher follow-up materials associated with the simulations, are developed to address common core science K-12 standards. CSDMS dataset documentation aims to make people aware of the fact that they look at numerical model results, that underlying models have inherent assumptions and simplifications, and that limitations are known. CSDMS contributions aim to familiarize large audiences with the use of numerical

  17. Detection of cracks on concrete surfaces by hyperspectral image processing

    Science.gov (United States)

    Santos, Bruno O.; Valença, Jonatas; Júlio, Eduardo

    2017-06-01

    All large infrastructures worldwide must have a suitable monitoring and maintenance plan, aiming to evaluate their behaviour and predict timely interventions. In the particular case of concrete infrastructures, the detection and characterization of crack patterns is a major indicator of their structural response. In this scope, methods based on image processing have been applied and presented. Usually, methods focus on image binarization followed by applications of mathematical morphology to identify cracks on concrete surface. In most cases, publications are focused on restricted areas of concrete surfaces and in a single crack. On-site, the methods and algorithms have to deal with several factors that interfere with the results, namely dirt and biological colonization. Thus, the automation of a procedure for on-site characterization of crack patterns is of great interest. This advance may result in an effective tool to support maintenance strategies and interventions planning. This paper presents a research based on the analysis and processing of hyper-spectral images for detection and classification of cracks on concrete structures. The objective of the study is to evaluate the applicability of several wavelengths of the electromagnetic spectrum for classification of cracks in concrete surfaces. An image survey considering highly discretized wavelengths between 425 nm and 950 nm was performed on concrete specimens, with bandwidths of 25 nm. The concrete specimens were produced with a crack pattern induced by applying a load with displacement control. The tests were conducted to simulate usual on-site drawbacks. In this context, the surface of the specimen was subjected to biological colonization (leaves and moss). To evaluate the results and enhance crack patterns a clustering method, namely k-means algorithm, is being applied. The research conducted allows to define the suitability of using clustering k-means algorithm combined with hyper-spectral images highly

  18. Non-contact thermoacoustic detection of embedded targets using airborne-capacitive micromachined ultrasonic transducers

    Science.gov (United States)

    Nan, Hao; Boyle, Kevin C.; Apte, Nikhil; Aliroteh, Miaad S.; Bhuyan, Anshuman; Nikoozadeh, Amin; Khuri-Yakub, Butrus T.; Arbabian, Amin

    2015-02-01

    A radio frequency (RF)/ultrasound hybrid imaging system using airborne capacitive micromachined ultrasonic transducers (CMUTs) is proposed for the remote detection of embedded objects in highly dispersive media (e.g., water, soil, and tissue). RF excitation provides permittivity contrast, and ultra-sensitive airborne-ultrasound detection measures thermoacoustic-generated acoustic waves that initiate at the boundaries of the embedded target, go through the medium-air interface, and finally reach the transducer. Vented wideband CMUTs interface to 0.18 μm CMOS low-noise amplifiers to provide displacement detection sensitivity of 1.3 pm at the transducer surface. The carefully designed vented CMUT structure provides a fractional bandwidth of 3.5% utilizing the squeeze-film damping of the air in the cavity.

  19. High frequency ultrasonic imaging using thermal mechanical noise recorded on capacitive micromachined transducer arrays

    Science.gov (United States)

    Lani, Shane; Satir, Sarp; Gurun, Gokce; Sabra, Karim G.; Levent Degertekin, F.

    2011-11-01

    The cross-correlation of diffuse thermal-mechanical noise recorded by two sensors yields an estimate of the ultrasonic waves propagating between them. We used this approach at high frequencies (1-30 MHz) on a capacitive micromachined ultrasonic transducer (CMUT) ring array (d = 725 μm), monolithically integrated with low noise complementary metal oxide semiconductor electronics. The thermal-mechanical noise cross-correlations between the CMUT array elements in immersion reveal both evanescent surface waves (below 10 MHz) and waves propagating primarily in the fluid (above 10 MHz). These propagating waves may allow passive imaging of scatterers closer to the array as compared to conventional pulse-echo systems, providing potentially higher resolution.

  20. A Flexible Ultrasound Transducer Array with Micro-Machined Bulk PZT

    Directory of Open Access Journals (Sweden)

    Zhe Wang

    2015-01-01

    Full Text Available This paper proposes a novel flexible piezoelectric micro-machined ultrasound transducer, which is based on PZT and a polyimide substrate. The transducer is made on the polyimide substrate and packaged with medical polydimethylsiloxane. Instead of etching the PZT ceramic, this paper proposes a method of putting diced PZT blocks into holes on the polyimide which are pre-etched. The device works in d31 mode and the electromechanical coupling factor is 22.25%. Its flexibility, good conformal contacting with skin surfaces and proper resonant frequency make the device suitable for heart imaging. The flexible packaging ultrasound transducer also has a good waterproof performance after hundreds of ultrasonic electric tests in water. It is a promising ultrasound transducer and will be an effective supplementary ultrasound imaging method in the practical applications.

  1. Lead-Free Piezoelectric Diaphragm Biosensors Based on Micro-Machining Technology and Chemical Solution Deposition.

    Science.gov (United States)

    Li, Xiaomeng; Wu, Xiaoqing; Shi, Peng; Ye, Zuo-Guang

    2016-01-12

    In this paper, we present a new approach to the fabrication of integrated silicon-based piezoelectric diaphragm-type biosensors by using sodium potassium niobate-silver niobate (0.82KNN-0.18AN) composite lead-free thin film as the piezoelectric layer. The piezoelectric diaphragms were designed and fabricated by micro-machining technology and chemical solution deposition. The fabricated device was very sensitive to the mass changes caused by various targets attached on the surface of diaphragm. The measured mass sensitivity value was about 931 Hz/μg. Its good performance shows that the piezoelectric diaphragm biosensor can be used as a cost-effective platform for nucleic acid testing.

  2. Lead-Free Piezoelectric Diaphragm Biosensors Based on Micro-Machining Technology and Chemical Solution Deposition

    Directory of Open Access Journals (Sweden)

    Xiaomeng Li

    2016-01-01

    Full Text Available In this paper, we present a new approach to the fabrication of integrated silicon-based piezoelectric diaphragm-type biosensors by using sodium potassium niobate-silver niobate (0.82KNN-0.18AN composite lead-free thin film as the piezoelectric layer. The piezoelectric diaphragms were designed and fabricated by micro-machining technology and chemical solution deposition. The fabricated device was very sensitive to the mass changes caused by various targets attached on the surface of diaphragm. The measured mass sensitivity value was about 931 Hz/μg. Its good performance shows that the piezoelectric diaphragm biosensor can be used as a cost-effective platform for nucleic acid testing.

  3. Multi-Level Micromachined Systems-on-a-Chip: Technology and Applications

    Energy Technology Data Exchange (ETDEWEB)

    Allen, J.J.; Krygowski, T.W.; Miller, S.L.; Montague, S.; Rodgers, M.S.; Smith, J.H.; Sniegowski, J.J.

    1998-10-27

    Researchers at Sandia have recently designed and built several research prototypes, which demonstrate that truly complex mechanical systems can now be realized in a surface micromachined technology. These MicroElectro- Mechanical Systems (MEMS) include advanced actuators, torque multiplying gear tmins, rack and pinion assemblies, positionable mirrors, and mechanical discriminators. All of tile mechanical components are batch fabricated on a single chip of silicon using the infrastructure origimdly developed to support today's highly reliabk; and robust microelectronics industry. Sand ia is also developing the technology 10 integrate microelectronic circuits onto the s,ime piece of silicon that is used to fabricate the MEMS devices. This significantly increases sensitivity and reliability, while fhrther reducing package size and fabrication costs. A review of the MEMS technology and capabilities available at Sandia National Laboratories is presented.

  4. Improving the Design of Capacitive Micromachined Ultrasonic Transducers Aided with Sensitivity Analysis

    Directory of Open Access Journals (Sweden)

    A Martowicz

    2016-09-01

    Full Text Available The paper presents the results of analysis performed to search for feasible design improvements for capacitive micromachined ultrasonic transducer. Carried out search has been aided with the sensitivity analysis and the application of Response Surface Method. The multiphysics approach has been taken into account in elaborated finite element model of one cell of described transducer in order to include significant physical phenomena present in modelled microdevice. The set of twelve input uncertain and design parameters consists of geometric, material and control properties. The amplitude of dynamic membrane deformation of the transducer has been chosen as studied parameter. The objective of performed study has been defined as the task of finding robust design configurations of the transducer, i.e. characterizing maximal value of deformation amplitude with its minimal variation.

  5. Evidence of Space Weathering Processes Across the Surface of Vesta

    Science.gov (United States)

    Pieters, Carle M.; Blewett, David T.; Gaffey, Michael; Mittlefehldt, David W.; CristinaDeSanctis, Maria; Reddy, Vishnu; Coradini, Angioletta; Nathues, Andreas; Denevi, Brett W.; Li, Jian-Yang; hide

    2011-01-01

    As NASA s Dawn spacecraft explores the surface of Vesta, it has become abundantly clear that Vesta is like no other planetary body visited to date. Dawn is collecting global data at increasingly higher spatial resolution during its one-year orbital mission. The bulk properties of Vesta have previously been linked to the HED meteorites through remote mineral characterization of its surface from Earth-based spectroscopy. A principal puzzle has been why Vesta exhibits relatively unweathered diagnostic optical features compared to other large asteroids. Is this due to the composition of this proto-planet or the space environment at Vesta? Alteration or weathering of materials in space normally develops as the products of several processes accumulate on the surface or in an evolving particulate regolith, transforming the bedrock into fragmental material with properties that may be measurably different from the original. Data from Dawn reveal that the regolith of Vesta is exceptionally diverse. Regional surface units are observed that have not been erased by weathering with time. Several morphologically-fresh craters have excavated bright, mafic-rich materials and exhibit bright ray systems. Some of the larger craters have surrounding subdued regions (often asymmetric) that are lower in albedo and relatively red-sloped in the visible while exhibiting weaker mafic signatures. Several other prominent craters have rim exposures containing very dark material and/or display a system of prominent dark rays. Most, but not all, dark areas associated with craters exhibit significantly lower spectral contrast, suggesting that either a Vesta lithology with an opaque component has been exposed locally or that the surface has been contaminated by a relatively dark impactor. Similarly, most, but not all, bright areas associated with craters exhibit enhanced mafic signatures compared to surroundings. On a regional scale, the large south polar structure and surrounding terrain exhibit

  6. Novel CNC Grinding Process Control for Nanometric Surface Roughness for Aspheric Space Optical Surfaces

    Directory of Open Access Journals (Sweden)

    Jeong-Yeol Han

    2004-06-01

    Full Text Available Optics fabrication process for precision space optical parts includes bound abrasive grinding, loose abrasive lapping and polishing. The traditional bound abrasive grinding with bronze bond cupped diamond wheel leaves the machine marks of about 20 μm rms in height and the subsurface damage of about 1 μm rms in height to be removed by subsequent loose abrasive lapping. We explored an efficient quantitative control of precision CNC grinding. The machining parameters such as grain size, work-piece rotation speed and feed rate were altered while grinding the work-piece surfaces of 20-100 mm in diameter. The input grinding variables and the resulting surface quality data were used to build grinding prediction models using empirical and multi-variable regression analysis. The effectiveness of such grinding prediction models was then examined by running a series of precision CNC grinding operation with a set of controlled input variables and predicted output surface quality indicators. The experiment achieved the predictability down to ±20 nm in height and the surface roughness down to 36 nm in height. This study contributed to improvement of the process efficiency reaching directly the polishing and figuring process without the need for the loose abrasive lapping stage.

  7. Using infrared thermography for understanding and quantifying soil surface processes

    Science.gov (United States)

    de Lima, João L. M. P.

    2017-04-01

    At present, our understanding of the soil hydrologic response is restricted by measurement limitations. In the literature, there have been repeatedly calls for interdisciplinary approaches to expand our knowledge in this field and eventually overcome the limitations that are inherent to conventional measuring techniques used, for example, for tracing water at the basin, hillslope and even field or plot scales. Infrared thermography is a versatile, accurate and fast technique of monitoring surface temperature and has been used in a variety of fields, such as military surveillance, medical diagnosis, industrial processes optimisation, building inspections and agriculture. However, many applications are still to be fully explored. In surface hydrology, it has been successfully employed as a high spatial and temporal resolution non-invasive and non-destructive imaging tool to e.g. access groundwater discharges into waterbodies or quantify thermal heterogeneities of streams. It is believed that thermal infrared imagery can grasp the spatial and temporal variability of many processes at the soil surface. Thermography interprets the heat signals and can provide an attractive view for identifying both areas where water is flowing or has infiltrated more, or accumulated temporarily in depressions or macropores. Therefore, we hope to demonstrate the potential for thermal infrared imagery to indirectly make a quantitative estimation of several hydrologic processes. Applications include: e.g. mapping infiltration, microrelief and macropores; estimating flow velocities; defining sampling strategies; identifying water sources, accumulation of waters or even connectivity. Protocols for the assessment of several hydrologic processes with the help of IR thermography will be briefly explained, presenting some examples from laboratory soil flumes and field.

  8. UMTRA Surface Project management action process document: Final. Revision 2

    International Nuclear Information System (INIS)

    1996-06-01

    Title 1 of the UMTRCA authorized the DOE to undertake remedial actions at these designed sites and associated vicinity properties (VP), which contain uranium mill tailings and other residual radioactive materials (RRM) derived from the processing sites. Title 2 of the UMTRCA addresses uranium mill sites that were licensed at the time the UMTRCA was enacted. Cleanup of these Title 2 sites is the responsibility of the licensees. The cleanup of the Title 1 sites has been split into two separate projects: the Surface Project, which deals with the mill buildings, tailings, and contaminated soils at the sites and VPs; and the Ground Water Project, which is limited to the contaminated ground water at the sites. This management action process (MAP) document discusses the Uranium Mill Tailings Remedial Action (UMTRA) Surface Project. Since its inception through March 1996, the Surface Project (hereinafter called the Project) has cleaned up 16 of the 24 designated processing sites and approximately 5,000 VPs, reducing the risk to human health and the environment posed by the uranium mill tailings. Two of the 24 sites, Belfield and Bowman, North Dakota, will not be remediated at the request of the state, reducing the total number of sites to 22. By the start of FY1998, the remaining 6 processing sites and associated VPs will be cleaned up. The remedial action activities to be funded in FY1998 by the FY1998 budget request are remediation of the remaining Grand Junction, Colorado, VPs; closure of the Cheney disposal cell in Grand Junction, Colorado; and preparation of the completion reports for 4 completed sites

  9. Decontamination Efficiency of Fish Bacterial Flora from Processing Surfaces

    Directory of Open Access Journals (Sweden)

    Birna Guðbjörnsdóttir

    2009-01-01

    Full Text Available There are numerous parameters that can influence bacterial decontamination during washing of machinery and equipment in a food processing establishment. Incomplete decontamination of bacteria will increase the risk of biofilm formation and consequently increase the risk of pathogen contamination or prevalence of other undesirable microorganisms such as spoilage bacteria in the processing line. The efficiency of a typical washing protocol has been determined by testing three critical parameters and their effects on bacterial decontamination. Two surface materials (plastic and stainless steel, water temperatures (7 and 25 °C and detergent concentrations (2 and 4 % were used for this purpose in combination with two types of detergents. Biofilm was prepared on the surfaces with undefined bacterial flora obtained from minced cod fillets. The bacterial flora of the biofilm was characterised by cultivation and molecular analysis of 16S rRNA genes. All different combinations of washing protocols tested were able to remove more than 99.9 % of the bacteria in the biofilm and reduce the cell number from 7 to 0 or 2 log units of bacteria/cm2. The results show that it is possible to use less diluted detergents than recommended with comparable success, and it is easier to clean surface material made of stainless steel compared to polyethylene plastic.

  10. Dynamics of gas-surface interactions atomic-level understanding of scattering processes at surfaces

    CERN Document Server

    Díez Muniño, Ricardo

    2013-01-01

    This book gives a representative survey of the state of the art of research on gas-surface interactions. It provides an overview of the current understanding of gas surface dynamics and, in particular, of the reactive and non-reactive processes of atoms and small molecules at surfaces. Leading scientists in the field, both from the theoretical and the experimental sides, write in this book about their most recent advances. Surface science grew as an interdisciplinary research area over the last decades, mostly because of new experimental technologies (ultra-high vacuum, for instance), as well as because of a novel paradigm, the ‘surface science’ approach. The book describes the second transformation which is now taking place pushed by the availability of powerful quantum-mechanical theoretical methods implemented numerically. In the book, experiment and theory progress hand in hand with an unprecedented degree of accuracy and control. The book presents how modern surface science targets the atomic-level u...

  11. Low temperature capacitive micromachined ultrasonic transducers (cMUTs) on glass substrate

    International Nuclear Information System (INIS)

    Bahette, E; Michaud, J F; Certon, D; Gross, D; Perroteau, M; Alquier, D

    2016-01-01

    The possibility of fabricating capacitive micromachined ultrasonic transducers (cMUTs) on glass substrates may open the way for new fields of application in which the transparency of the substrate is advantageous. In this study, we demonstrate that a low-temperature process can be carried out to achieve cMUTs on glass substrates. Limited to temperatures lower than 400 °C, the process is based on the use of nickel as a sacrificial layer. The cMUT electromechanical behavior is studied and the performance compared to those obtained with silicon substrates. The cMUTs fabricated on glass substrate showed performance comparable with the Si ones. A slight shift in the resonance frequency and collapse voltage was observed. It is shown that these differences arise from the residual mechanical stresses in the substrate. (paper)

  12. Low temperature capacitive micromachined ultrasonic transducers (cMUTs) on glass substrate

    Science.gov (United States)

    Bahette, E.; Michaud, J. F.; Certon, D.; Gross, D.; Perroteau, M.; Alquier, D.

    2016-11-01

    The possibility of fabricating capacitive micromachined ultrasonic transducers (cMUTs) on glass substrates may open the way for new fields of application in which the transparency of the substrate is advantageous. In this study, we demonstrate that a low-temperature process can be carried out to achieve cMUTs on glass substrates. Limited to temperatures lower than 400 °C, the process is based on the use of nickel as a sacrificial layer. The cMUT electromechanical behavior is studied and the performance compared to those obtained with silicon substrates. The cMUTs fabricated on glass substrate showed performance comparable with the Si ones. A slight shift in the resonance frequency and collapse voltage was observed. It is shown that these differences arise from the residual mechanical stresses in the substrate.

  13. Multi-scale surface-groundwater interactions: Processes and Implications

    Science.gov (United States)

    Packman, A. I.; Harvey, J. W.; Worman, A.; Cardenas, M. B.; Schumer, R.; Jerolmack, D. J.; Tank, J. L.; Stonedahl, S. H.

    2009-05-01

    Site-based investigations of stream-subsurface interactions normally focus on a limited range of spatial scales - typically either very shallow subsurface flows in the hyporheic zone, or much larger scale surface- groundwater interactions - but subsurface flows are linked across this entire continuum. Broad, multi-scale surface-groundwater interactions produce complex patterns in porewater flows, and interfacial fluxes do not average in a simple fashion because of the competitive effects of flows induced at different scales. For example, reach-scale stream-groundwater interactions produce sequences of gaining and losing reaches that can either suppress or enhance local-scale hyporheic exchange. Many individual topographic features also produce long power-law tails in surface residence time distributions, and the duration of these tails is greatly extended by interactions over a wide range of spatial scales. Simultaneous sediment transport and landscape evolution further complicates the analysis of porewater flow dynamics in rivers. Finally, inhomogeneity in important biogeochemical processes, particularly microbial processes that are stimulated near the sediment- water interface, leads to a great degree of non-linearity in chemical transformation rates in stream channels. This high degree of complexity in fluvial systems requires that careful approaches be used to extend local observations of hyporheic exchange and associated nutrient, carbon, and contaminant transformations to larger spatial scales. It is important to recognize that conventional advection-dispersion models are not expected to apply, and instead anomalous transport models must be used. Unfortunately, no generally applicable model is available for stream-groundwater interactions at the present time. Alternative approaches for modeling conservative and reactive transport will be discussed, and a strategy articulated for coping with the complexity of coupled surface-subsurface dynamics in fluvial

  14. Freeform micromachining of an infrared Alvarez lens

    Science.gov (United States)

    Smilie, Paul J.; Dutterer, Brian S.; Lineberger, Jennifer L.; Davies, Matthew A.; Suleski, Thomas J.

    2011-02-01

    In 1967, Luis Alvarez introduced a novel concept for a focusing lens whereby two transmitting elements with cubic polynomial surfaces yield a composite lens of variable focal length with small lateral shifts. Computer simulations have demonstrated the behavior of these devices, but fabricating the refractive cubic surfaces of the types needed with adequate precision and depth modulation has proven to be challenging using standard methods, and, to the authors' knowledge, Alvarez lens elements have not been previously machined in infrared materials. Recent developments in freeform diamond machining capability have enabled the fabrication of such devices. In this paper, we discuss the fabrication of freeform refractive Alvarez elements in germanium using diamond micro-milling on a five-axis Moore Nanotech® 350FG Freeform Generator. Machining approaches are discussed, and measurements of surface figure and finish are presented. Initial experimental tests of optical performance are also discussed.

  15. Micromachining of inertial confinement fusion targets

    International Nuclear Information System (INIS)

    Gobby, P.L.; Salzer, L.J.; Day, R.D.

    1996-01-01

    Many experiments conducted on today's largest inertial confinement fusion drive lasers require target components with sub-millimeter dimensions, precisions of a micron or less and surface finishes measured in nanometers. For metal and plastic, techniques using direct machining with diamond tools have been developed that yield the desired parts. New techniques that will be discussed include the quick-flip locator, a magnetically held kinematic mount that has allowed the direct machining of millimeter-sized beryllium hemishells whose inside and outside surface are concentric to within 0.25 micron, and an electronic version of a tracer lathe which has produced precise azimuthal variations of less than a micron

  16. Interdependencies of Arctic land surface processes: A uniquely sensitive environment

    Science.gov (United States)

    Bowling, L. C.

    2007-12-01

    The circumpolar arctic drainage basin is composed of several distinct ecoregions including steppe grassland and cropland, boreal forest and tundra. Land surface hydrology throughout this diverse region shares several unique features such as dramatic seasonal runoff differences controlled by snowmelt and ice break-up; the storage of significant portions of annual precipitation as snow and in lakes and wetlands; and the effects of ephemeral and permanently frozen soils. These arctic land processes are delicately balanced with the climate and are therefore important indicators of change. The litany of recently-detected changes in the Arctic includes changes in snow precipitation, trends and seasonal shifts in river discharge, increases and decreases in the extent of surface water, and warming soil temperatures. Although not unique to the arctic, increasing anthropogenic pressures represent an additional element of change in the form of resource extraction, fire threat and reservoir construction. The interdependence of the physical, biological and social systems mean that changes in primary indicators have large implications for land cover, animal populations and the regional carbon balance, all of which have the potential to feed back and induce further change. In fact, the complex relationships between the hydrological processes that make the Artic unique also render observed historical change difficult to interpret and predict, leading to conflicting explanations. For example, a decrease in snow accumulation may provide less insulation to the underlying soil resulting in greater frost development and increased spring runoff. Similarly, melting permafrost and ground ice may lead to ground subsidence and increased surface saturation and methane production, while more complete thaw may enhance drainage and result in drier soil conditions. The threshold nature of phase change around the freezing point makes the system especially sensitive to change. In addition, spatial

  17. EFFECT OF MINIMUM QUANTITY LUBRICATION ON SURFACE ROUGHNESS IN TOOL-BASED MICROMILLING

    Directory of Open Access Journals (Sweden)

    Mohammad Yeakub Ali

    2017-05-01

    Full Text Available Cutting fluid plays an important role in machining processes to achieve dimensional accuracy in reducing tool wear and improving the tool life. Conventional flood cooling method in machining processes is not cost effective and consumption of huge amount of cutting fluids is not healthy and environmental friendly. In micromachining, flood cooling is not recommended to avoid possible damage of the microstructures. Therefore, one of the alternatives to overcome the environmental issues to use minimum quantity of lubrication (MQL in machining process. MQL is eco-friendly and has economical advantage on manufacturing cost. However, there observed lack of study on MQL in improving machined surface roughness in micromilling. Study of the effects of MQL on surface roughness should be carried out because surface roughness is one of the important issues in micromachined parts such as microfluidic channels. This paper investigates and compares surface roughness with the presence of MQL and dry cutting in micromilling of aluminium alloy 1100 using DT-110 milling machine. The relationship among depth of cut, feed rate, and spindle speed on surface roughness is also analyzed. All three machining parameters identified as significant for surface roughness with dry cutting which are depth of cut, feed rate, and spindle speed. For surface roughness with MQL, it is found that spindle speed did not give much influence on surface roughness. The presence of MQL provides a better surface roughness by decreasing the friction between tool and workpiece.

  18. Experimental investigation of surface roughness in electrical discharge turning process

    Science.gov (United States)

    Gohil, Vikas; Puri, Y. M.

    2016-10-01

    In the present study the effects of machining parameters on the average surface roughness (Ra) in electrical discharge turning (EDT) is investigated. EDT is a new machining process in which a rotary spindle is added to a conventional die-sinking EDM machine in order to produce cylindrical components. In this method a new process parameter (spindle rotation) along with pulse on time and current is introduced to study its effect on Ra. This has been done by means of full factorial design (21 × 32) of experiments. A mathematical model has been developed for Ra by regression analysis and factor effects were analyzed using analysis of variance (ANOVA). Signal-to-noise ratio analysis is used to find the optimal condition.

  19. Surfaces: processing, coating, decontamination, pollution, etc. Surface mastering to prevent component corrosion; Surfaces: traitement, revetements, decontamination, pollution, etc. Maitrise de la surface pour prevenir la corrosion des composants

    Energy Technology Data Exchange (ETDEWEB)

    Foucault, M. [Departement Corrosion Chimie, AREVA Centre Technique, BP 181, 71205 Le Creusot (France)

    2012-07-01

    In the primary and secondary circuits of nuclear Pressurized Water Reactors, AREVA uses several nickel-based alloys or austenitic stainless steels for the manufacture of safety components. The experience feedback of the last twenty years allows us to point out the major role hold by the component surface state in their life duration. In this paper, we present four examples of problem encountered and solved by a surface study and the definition and implementation of processes for the surface control of the repaired components. Then, we propose some ideas about the present needs in term of analysis means to improve the surface knowledge and control of the manufactured components. (author)

  20. Dual Electrolytic Plasma Processing for Steel Surface Cleaning and Passivation

    Science.gov (United States)

    Yang, L.; Zhang, P.; Shi, J.; Liang, J.; Tian, W. B.; Zhang, Y. M.; Sun, Z. M.

    2017-10-01

    To remove the rust on rebars and passivate the fresh surfaces, electrodes reversing electrolytic plasma processing (EPP) was proposed and conducted in a 10 wt.% Na2CO3 aqueous solution. The morphology and the composition of the surface were investigated by SEM and XPS. Experimental results show that the rust on the surface was removed effectively by cathode EPP, and a passive film containing Cr2O3 was achieved by the succeeding anode EPP treatment, by a simple operation of reversing the bias. The corrosion resistance was evaluated in a 3.5 wt.% NaCl aqueous solution using an electrochemical workstation. In comparison, the corrosion resistance was improved by the succeeding anode EPP treatment, which is evidenced by a positive shift of the open-circuit potential, an increase in the electrochemical impedance representing the inner layer by 76.8% and the decrease in the corrosion current density by 49.6%. This is an effective and environment-friendly technique to clean and passivate rebars and similar steel materials.

  1. Surface Wave Simulation and Processing with MatSeis

    Energy Technology Data Exchange (ETDEWEB)

    THOMPSON,BEVERLY D.; CHAEL,ERIC P.; YOUNG,CHRISTOPHER J.; WALTER,WILLIAM R.; PASYANOS,MICHAEL E.

    2000-08-07

    In order to exploit the information on surface wave propagation that is stored in large seismic event datasets, Sandia and Lawrence Livermore National Laboratories have developed a MatSeis interface for performing phase-matched filtering of Rayleigh arrivals. MatSeis is a Matlab-based seismic processing toolkit which provides graphical tools for analyzing seismic data from a network of stations. Tools are available for spectral and polarization measurements, as well as beam forming and f-k analysis with array data, to name just a few. Additionally, one has full access to the Matlab environment and any functions available there. Previously the authors reported the development of new MatSeis tools for calculating regional discrimination measurements. The first of these performs Lg coda analysis as developed by Mayeda and coworkers at Lawrence Livermore National Laboratory. A second tool measures regional phase amplitude ratios for an event and compares the results to ratios from known earthquakes and explosions. Release 1.5 of MatSeis includes the new interface for the analysis of surface wave arrivals. This effort involves the use of regionalized dispersion models from a repository of surface wave data and the construction of phase-matched filters to improve surface wave identification, detection, and magnitude calculation. The tool works as follows. First, a ray is traced from source to receiver through a user-defined grid containing different group velocity versus period values to determine the composite group velocity curve for the path. This curve is shown along with the upper and lower group velocity bounds for reference. Next, the curve is used to create a phase-matched filter, apply the filter, and show the resultant waveform. The application of the filter allows obscured Rayleigh arrivals to be more easily identified. Finally, after screening information outside the range of the phase-matched filter, an inverse version of the filter is applied to obtain a

  2. Parabolic flights as Earth analogue for surface processes on Mars

    Science.gov (United States)

    Kuhn, Nikolaus J.

    2017-04-01

    The interpretation of landforms and environmental archives on Mars with regards to habitability and preservation of traces of life requires a quantitative understanding of the processes that shaped them. Commonly, qualitative similarities in sedimentary rocks between Earth and Mars are used as an analogue to reconstruct the environments in which they formed on Mars. However, flow hydraulics and sedimentation differ between Earth and Mars, requiring a recalibration of models describing runoff, erosion, transport and deposition. Simulation of these processes on Earth is limited because gravity cannot be changed and the trade-off between adjusting e.g. fluid or particle density generates other mismatches, such as fluid viscosity. Computational Fluid Dynamics offer an alternative, but would also require a certain degree of calibration or testing. Parabolic flights offer a possibility to amend the shortcomings of these approaches. Parabolas with reduced gravity last up to 30 seconds, which allows the simulation of sedimentation processes and the measurement of flow hydraulics. This study summarizes the experience gathered during four campaigns of parabolic flights, aimed at identifying potential and limitations of their use as an Earth analogue for surface processes on Mars.

  3. Silicon Micromachined Sensor for Broadband Vibration Analysis

    Science.gov (United States)

    Gutierrez, Adolfo; Edmans, Daniel; Cormeau, Chris; Seidler, Gernot; Deangelis, Dave; Maby, Edward

    1995-01-01

    The development of a family of silicon based integrated vibration sensors capable of sensing mechanical resonances over a broad range of frequencies with minimal signal processing requirements is presented. Two basic general embodiments of the concept were designed and fabricated. The first design was structured around an array of cantilever beams and fabricated using the ARPA sponsored multi-user MEMS processing system (MUMPS) process at the Microelectronics Center of North Carolina (MCNC). As part of the design process for this first sensor, a comprehensive finite elements analysis of the resonant modes and stress distribution was performed using PATRAN. The dependence of strain distribution and resonant frequency response as a function of Young's modulus in the Poly-Si structural material was studied. Analytical models were also studied. In-house experimental characterization using optical interferometry techniques were performed under controlled low pressure conditions. A second design, intended to operate in a non-resonant mode and capable of broadband frequency response, was proposed and developed around the concept of a cantilever beam integrated with a feedback control loop to produce a null mode vibration sensor. A proprietary process was used to integrat a metal-oxide semiconductor (MOS) sensing device, with actuators and a cantilever beam, as part of a compatible process. Both devices, once incorporated as part of multifunction data acquisition and telemetry systems will constitute a useful system for NASA launch vibration monitoring operations. Satellite and other space structures can benefit from the sensor for mechanical condition monitoring functions.

  4. Modeling and Design of Capacitive Micromachined Ultrasonic Transducers Based-on Database Optimization

    International Nuclear Information System (INIS)

    Chang, M W; Gwo, T J; Deng, T M; Chang, H C

    2006-01-01

    A Capacitive Micromachined Ultrasonic Transducers simulation database, based on electromechanical coupling theory, has been fully developed for versatile capacitive microtransducer design and analysis. Both arithmetic and graphic configurations are used to find optimal parameters based on serial coupling simulations. The key modeling parameters identified can improve microtransducer's character and reliability effectively. This method could be used to reduce design time and fabrication cost, eliminating trial-and-error procedures. Various microtransducers, with optimized characteristics, can be developed economically using the developed database. A simulation to design an ultrasonic microtransducer is completed as an executed example. The dependent relationship between membrane geometry, vibration displacement and output response is demonstrated. The electromechanical coupling effects, mechanical impedance and frequency response are also taken into consideration for optimal microstructures. The microdevice parameters with the best output signal response are predicted, and microfabrication processing constraints and realities are also taken into consideration

  5. Design, simulation and testing of capacitive micromachined ultrasound transducer-based phospholipidic biosensor elements

    International Nuclear Information System (INIS)

    Sapeliauskas, E; Vanagas, G; Barauskas, D; Mikolajunas, M; Pakenas, E; Pelenis, D; Sergalis, G; Jukna, T; Virzonis, D

    2015-01-01

    In this study we present theoretical proof of the principle of using interdigital capacitive micromachined ultrasound transducers (CMUT IDTs) for the detection of phospholipid membrane elasticity. Proof of principle was needed to find out whether the new type of microelectromechanical sensors of the toxins incorporated with the lipid membranes was feasible. CMUT IDTs for 10 MHz operation in water, with 146 µm spaced double fingers were designed and fabricated using the surface micromachining technique. Fabricated CMUTs were tested for their resonance in air and for Scholte-type wave transmission in deionized water and isopropanol solutions containing 0%, 10% and 20% water. The amplitude and phase velocity of the excited and received Scholte waves were measured in a 200 µm height microchannel, capped with a thick layer of soft polymer, which suppressed the production of non-informative guided waves. It was determined that the average sensitivity of Scholte wave phase velocity within the given range of solution concentrations is 2.9 m s −1 per one percent. Experimental data were also used to verify the adequacy of the finite element model, which was found to be suitable for reliable prediction of the phospholipid membrane elasticity impact on the Scholte wave phase velocity or the resonance frequency in the present IDT structure. It was determined that for the analyzed conditions (the elasticity of simulated phospholipid membrane changed from 1 to 5 GPa) the sensitivity of the measurement channel is expected to be no worse than 2 kHz GPa −1 in terms of the Scholte wave and CMUT IDT resonance frequency. This leads to a positive conclusion on the feasibility of the new sensor type. (paper)

  6. Design, simulation and testing of capacitive micromachined ultrasound transducer-based phospholipidic biosensor elements

    Science.gov (United States)

    Sapeliauskas, E.; Vanagas, G.; Barauskas, D.; Mikolajunas, M.; Pakenas, E.; Pelenis, D.; Sergalis, G.; Jukna, T.; Virzonis, D.

    2015-07-01

    In this study we present theoretical proof of the principle of using interdigital capacitive micromachined ultrasound transducers (CMUT IDTs) for the detection of phospholipid membrane elasticity. Proof of principle was needed to find out whether the new type of microelectromechanical sensors of the toxins incorporated with the lipid membranes was feasible. CMUT IDTs for 10 MHz operation in water, with 146 µm spaced double fingers were designed and fabricated using the surface micromachining technique. Fabricated CMUTs were tested for their resonance in air and for Scholte-type wave transmission in deionized water and isopropanol solutions containing 0%, 10% and 20% water. The amplitude and phase velocity of the excited and received Scholte waves were measured in a 200 µm height microchannel, capped with a thick layer of soft polymer, which suppressed the production of non-informative guided waves. It was determined that the average sensitivity of Scholte wave phase velocity within the given range of solution concentrations is 2.9 m s-1 per one percent. Experimental data were also used to verify the adequacy of the finite element model, which was found to be suitable for reliable prediction of the phospholipid membrane elasticity impact on the Scholte wave phase velocity or the resonance frequency in the present IDT structure. It was determined that for the analyzed conditions (the elasticity of simulated phospholipid membrane changed from 1 to 5 GPa) the sensitivity of the measurement channel is expected to be no worse than 2 kHz GPa-1 in terms of the Scholte wave and CMUT IDT resonance frequency. This leads to a positive conclusion on the feasibility of the new sensor type.

  7. MarsSI: Martian surface data processing information system

    Science.gov (United States)

    Quantin-Nataf, C.; Lozac'h, L.; Thollot, P.; Loizeau, D.; Bultel, B.; Fernando, J.; Allemand, P.; Dubuffet, F.; Poulet, F.; Ody, A.; Clenet, H.; Leyrat, C.; Harrisson, S.

    2018-01-01

    MarsSI (Acronym for Mars System of Information, https://emars.univ-lyon1.fr/MarsSI/, is a web Geographic Information System application which helps managing and processing martian orbital data. The MarsSI facility is part of the web portal called PSUP (Planetary SUrface Portal) developed by the Observatories of Paris Sud (OSUPS) and Lyon (OSUL) to provide users with efficient and easy access to data products dedicated to the martian surface. The portal proposes 1) the management and processing of data thanks to MarsSI and 2) the visualization and merging of high level (imagery, spectral, and topographic) products and catalogs via a web-based user interface (MarsVisu). The portal PSUP as well as the facility MarsVisu is detailed in a companion paper (Poulet et al., 2018). The purpose of this paper is to describe the facility MarsSI. From this application, users are able to easily and rapidly select observations, process raw data via automatic pipelines, and get back final products which can be visualized under Geographic Information Systems. Moreover, MarsSI also contains an automatic stereo-restitution pipeline in order to produce Digital Terrain Models (DTM) on demand from HiRISE (High Resolution Imaging Science Experiment) or CTX (Context Camera) pair-images. This application is funded by the European Union's Seventh Framework Programme (FP7/2007-2013) (ERC project eMars, No. 280168) and has been developed in the scope of Mars, but the design is applicable to any other planetary body of the solar system.

  8. Proton beam micromachining on PMMA, Foturan and CR-39 materials

    CERN Document Server

    Rajta, I; Kiss, A Z; Gomez-Morilla, I; Abraham, M H

    2003-01-01

    Proton Beam Micromachining was demonstrated at the Institute of Nuclear Research of the Hungarian Academy of Sciences using three different types of resists: PMMA, Foturan and CR-39 type Solid State Nuclear Track Detector material. Irradiations have been performed on the nuclear microprobe facility at ATOMKI. The beam scanning was done using a National Instruments (NI) card (model 6711), and the new C++ version of the program IonScan, developed specifically for PBM applications called IonScan 2.0. (R.P.)

  9. Capacitive micromachined ultrasonic transducer arrays as tunable acoustic metamaterials

    International Nuclear Information System (INIS)

    Lani, Shane W.; Sabra, Karim G.; Wasequr Rashid, M.; Hasler, Jennifer; Levent Degertekin, F.

    2014-01-01

    Capacitive Micromachined Ultrasonic Transducers (CMUTs) operating in immersion support dispersive evanescent waves due to the subwavelength periodic structure of electrostatically actuated membranes in the array. Evanescent wave characteristics also depend on the membrane resonance which is modified by the externally applied bias voltage, offering a mechanism to tune the CMUT array as an acoustic metamaterial. The dispersion and tunability characteristics are examined using a computationally efficient, mutual radiation impedance based approach to model a finite-size array and realistic parameters of variation. The simulations are verified, and tunability is demonstrated by experiments on a linear CMUT array operating in 2-12 MHz range

  10. Capacitive micromachined ultrasonic transducer arrays as tunable acoustic metamaterials

    Energy Technology Data Exchange (ETDEWEB)

    Lani, Shane W., E-mail: shane.w.lani@gmail.com, E-mail: karim.sabra@me.gatech.edu, E-mail: levent.degertekin@me.gatech.edu; Sabra, Karim G. [George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, 801Ferst Drive, Georgia 30332-0405 (United States); Wasequr Rashid, M.; Hasler, Jennifer [School of Electrical and Computer Engineering, Georgia Institute of Technology, Van Leer Electrical Engineering Building, 777 Atlantic Drive NW, Atlanta, Georgia 30332-0250 (United States); Levent Degertekin, F. [George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, 801Ferst Drive, Georgia 30332-0405 (United States); School of Electrical and Computer Engineering, Georgia Institute of Technology, Van Leer Electrical Engineering Building, 777 Atlantic Drive NW, Atlanta, Georgia 30332-0250 (United States)

    2014-02-03

    Capacitive Micromachined Ultrasonic Transducers (CMUTs) operating in immersion support dispersive evanescent waves due to the subwavelength periodic structure of electrostatically actuated membranes in the array. Evanescent wave characteristics also depend on the membrane resonance which is modified by the externally applied bias voltage, offering a mechanism to tune the CMUT array as an acoustic metamaterial. The dispersion and tunability characteristics are examined using a computationally efficient, mutual radiation impedance based approach to model a finite-size array and realistic parameters of variation. The simulations are verified, and tunability is demonstrated by experiments on a linear CMUT array operating in 2-12 MHz range.

  11. Development of capacitive Micromachined Ultrasonic Transducer (III) - Performance Test

    Energy Technology Data Exchange (ETDEWEB)

    Kim, Ki Bok; Ahn, Bong Young; Park, Hae Won; Kim, Young Joo; Lee, Seung Seok [Korea Research Institute of Standards and Science, Daejeon (Korea, Republic of)

    2004-12-15

    In this study, the capacitive micromachined ultrasonic transducer(cMUT) was developed based on the previous research results. The cross sectional image of the developed cMUT was characterized. To measure the membrane displacement of the cMUT, the Michelson phase modulation fiber interferometer was constructed. The measured membrane displacement was in good agreement with the result of the finite element analysis. To estimate the ultrasonic wave generated by the cMUT, an ultrasonic system including a pulser, receiver and charge amplifier was used. The cMUT developed in this study shows a good performance and hence will be widely used in the non-contact ultrasonic applications

  12. Capacitive micromachined ultrasonic transducer arrays as tunable acoustic metamaterials

    Science.gov (United States)

    Lani, Shane W.; Wasequr Rashid, M.; Hasler, Jennifer; Sabra, Karim G.; Levent Degertekin, F.

    2014-02-01

    Capacitive Micromachined Ultrasonic Transducers (CMUTs) operating in immersion support dispersive evanescent waves due to the subwavelength periodic structure of electrostatically actuated membranes in the array. Evanescent wave characteristics also depend on the membrane resonance which is modified by the externally applied bias voltage, offering a mechanism to tune the CMUT array as an acoustic metamaterial. The dispersion and tunability characteristics are examined using a computationally efficient, mutual radiation impedance based approach to model a finite-size array and realistic parameters of variation. The simulations are verified, and tunability is demonstrated by experiments on a linear CMUT array operating in 2-12 MHz range.

  13. Development of capacitive Micromachined Ultrasonic Transducer (III) - Performance Test

    International Nuclear Information System (INIS)

    Kim, Ki Bok; Ahn, Bong Young; Park, Hae Won; Kim, Young Joo; Lee, Seung Seok

    2004-01-01

    In this study, the capacitive micromachined ultrasonic transducer(cMUT) was developed based on the previous research results. The cross sectional image of the developed cMUT was characterized. To measure the membrane displacement of the cMUT, the Michelson phase modulation fiber interferometer was constructed. The measured membrane displacement was in good agreement with the result of the finite element analysis. To estimate the ultrasonic wave generated by the cMUT, an ultrasonic system including a pulser, receiver and charge amplifier was used. The cMUT developed in this study shows a good performance and hence will be widely used in the non-contact ultrasonic applications

  14. Micromachined silicon grisms for infrared optics.

    Science.gov (United States)

    Mar, Douglas J; Marsh, Jasmina P; Deen, Casey P; Ling, Hao; Choo, Hosung; Jaffe, Daniel T

    2009-02-20

    We demonstrate the successful fabrication of large format (approximately 50 mm × 50 mm) gratings in monolithic silicon for use as high-efficiency grisms at infrared wavelengths. The substrates for the grisms were thick (8-16 mm) disks of precisely oriented single-crystal silicon (refractive index, n ~ 3.42). We used microlithography and chemical wet etching techniques to produce the diffraction gratings on one side of these substrates. These techniques permitted the manufacture of coarse grooves (as few as 7 grooves/mm) with precise control of the blaze angle and groove profile and resulted in excellent groove surface quality. Profilometric measurements of the groove structure of the gratings confirm that the physical dimensions of the final devices closely match their design values. Optical performance of these devices exceeds the specifications required for diffraction-limited performance (RMS wave surface error silicon transmits well, the blaze control and high index permit high-resolution, high-order dispersion in a compact space. The first application of these grisms is to provide FORCAST, a mid-infrared camera on NASA's airborne observatory, with a moderate resolution (R=100-1000) spectroscopic capability.

  15. Optimization of vibratory welding process parameters using response surface methodology

    Energy Technology Data Exchange (ETDEWEB)

    Singh, Pravin Kumar; Kumar, S. Deepak; Patel, D.; Prasad, S. B. [National Institute of Technology Jamshedpur, Jharkhand (India)

    2017-05-15

    The current investigation was carried out to study the effect of vibratory welding technique on mechanical properties of 6 mm thick butt welded mild steel plates. A new concept of vibratory welding technique has been designed and developed which is capable to transfer vibrations, having resonance frequency of 300 Hz, into the molten weld pool before it solidifies during the Shielded metal arc welding (SMAW) process. The important process parameters of vibratory welding technique namely welding current, welding speed and frequency of the vibrations induced in molten weld pool were optimized using Taguchi’s analysis and Response surface methodology (RSM). The effect of process parameters on tensile strength and hardness were evaluated using optimization techniques. Applying RSM, the effect of vibratory welding parameters on tensile strength and hardness were obtained through two separate regression equations. Results showed that, the most influencing factor for the desired tensile strength and hardness is frequency at its resonance value, i.e. 300 Hz. The micro-hardness and microstructures of the vibratory welded joints were studied in detail and compared with those of conventional SMAW joints. Comparatively, uniform and fine grain structure has been found in vibratory welded joints.

  16. Micromachined silicon cantilevers with integrated high-frequency magnetoimpedance sensors for simultaneous strain and magnetic field detection

    Science.gov (United States)

    Buettel, G.; Joppich, J.; Hartmann, U.

    2017-12-01

    Giant magnetoimpedance (GMI) measurements in the high-frequency regime utilizing a coplanar waveguide with an integrated Permalloy multilayer and micromachined on a silicon cantilever are reported. The fabrication process is described in detail. The aspect ratio of the magnetic multilayer in the magnetoresistive and magnetostrictive device was varied. Tensile strain and compressive strain were applied. Vector network analyzer measurements in the range from the skin effect to ferromagnetic resonance confirm the technological potential of GMI-based micro-electro-mechanical devices for strain and magnetic field sensing applications. The strain-impedance gauge factor was quantified by finite element strain calculations and reaches a maximum value of almost 200.

  17. Use of Radiotracers to Study Surface Water Processes

    International Nuclear Information System (INIS)

    2015-03-01

    This publication represents a sound knowledge base for the conduct of radiotracer studies in the environment, with papers on radiotracer methodology, radiation protection and regulation, data analysis and modelling. Environmental case histories from five Member States - Australia, Brazil, France, the Republic of Korea and Sweden - provide information on conducting studies involving he use of radioactive tracers. These case histories are not meant as guidelines for preparing a field study but can rather serve as examples of the type, caution and extent of work involved in environmental studies using radiotracers. This publication can provide guidance for conducting potential future training events in the use of radioactive traces in the environment and can serve as a key reference to all concerned directly with surface water processes

  18. Materials processing with superposed Bessel beams

    Science.gov (United States)

    Yu, Xiaoming; Trallero-Herrero, Carlos A.; Lei, Shuting

    2016-01-01

    We report experimental results of femtosecond laser processing on the surface of glass and metal thin film using superposed Bessel beams. These beams are generated by a combination of a spatial light modulator (SLM) and an axicon with >50% efficiency, and they possess the long depth-of-focus (propagation-invariant) property as found in ordinary Bessel beams. Through micromachining experiments using femtosecond laser pulses, we show that multiple craters can be fabricated on glass with single-shot exposure, and the 1+(⿿1) superposed beam can reduce collateral damage caused by the rings in zero-order Bessel beams in the scribing of metal thin film.

  19. The Amazon River reversal explained by tectonic and surface processes

    Science.gov (United States)

    Sacek, V.

    2014-12-01

    The drainage pattern in Amazonia was expressively modified during the mountain building of central and northern Andes. In Early Miocene, the fluvial systems in western Amazonia flowed to the foreland basins and northward to the Caribbean. By Late Miocene the drainage reversal occurred and formed the transcontinental Amazon River, connecting the Andes and the equatorial Atlantic margin. This event is recorded in the stratigraphic evolution of the Foz do Amazonas Basin by the onset of Andean-derived sedimentation. Additionally, an abrupt increase in sedimentation rate after the reversal occurred in the Foz do Amazonas Basin. Based on three-dimensional numerical models that couple surface processes, flexural isostasy and crustal thickening due to orogeny, I concluded that the Miocene drainage reversal can be explained by the flexural and surface processes response to the Andes formation with no need to invoke dynamic topography induced by mantle convection, as previously proposed. I observed that the instant of drainage reversal is directly linked to the rate of crustal thickening in the orogeny, the rate of erosion and, mainly, the efficiency of sediment transport. Moreover, the numerical experiments were able to predict the increase in sedimentation rate in the Amazon fan after the drainage reversal of the Amazon River as observed in the Late Miocene-Pliocene sedimentary record. However, the present numerical model fails to fully reproduce the evolution of the Pebas system, a megawetland in western Amazonia that preceded the drainage reversal. Therefore, further investigation is necessary to evaluate the mechanisms that generated and sustained the Pebas system.

  20. Capacitive micromachined ultrasonic resonator for ultra sensitive trace gas detection

    Science.gov (United States)

    Ge, Li-Feng

    2013-01-01

    The ultra-sensitive trace gas detection has become increasingly important due to the demand for environment and sci-tech progress. In recent years a capacitive micromachined ultrasonic transducer (CMUT) with circular diaphragms used for imaging has been successfully used to detect chemical gases, and shows promising results. However, its behavior is the same as that of CMUTs for ranging, imaging and therapy applications, where the acoustic radiation with a certain power, produced by the vibration of circular diaphragms operating at the first bending mode, is required but is undesirable for gas sensing since it disturbs inevitably the environment to be measured. This paper, therefore, presents to optimize its behavior after an ideal capacitive micromachined ultrasonic resonator (CMUR) and then to utilize second-order and high-order bending modes of the circular diaphragm to minimize its acoustic radiation and obtain higher resonance frequency also. Since the resonance frequencies of high-order modes much higher than the fundamental frequency, an ultra-high operating frequency of GHz can be reached so that raising greatly the sensitivity of the CMUR and being able to realize the ultra-sensitive trace gas detections.

  1. Eye Vision Testing System and Eyewear Using Micromachines

    Directory of Open Access Journals (Sweden)

    Nabeel A. Riza

    2015-11-01

    Full Text Available Proposed is a novel eye vision testing system based on micromachines that uses micro-optic, micromechanic, and microelectronic technologies. The micromachines include a programmable micro-optic lens and aperture control devices, pico-projectors, Radio Frequency (RF, optical wireless communication and control links, and energy harvesting and storage devices with remote wireless energy transfer capabilities. The portable lightweight system can measure eye refractive powers, optimize light conditions for the eye under testing, conduct color-blindness tests, and implement eye strain relief and eye muscle exercises via time sequenced imaging. A basic eye vision test system is built in the laboratory for near-sighted (myopic vision spherical lens refractive error correction. Refractive error corrections from zero up to −5.0 Diopters and −2.0 Diopters are experimentally demonstrated using the Electronic-Lens (E-Lens and aperture control methods, respectively. The proposed portable eye vision test system is suited for children’s eye tests and developing world eye centers where technical expertise may be limited. Design of a novel low-cost human vision corrective eyewear is also presented based on the proposed aperture control concept. Given its simplistic and economical design, significant impact can be created for humans with vision problems in the under-developed world.

  2. 30 CFR 912.764 - Process for designating areas unsuitable for surface coal mining operations.

    Science.gov (United States)

    2010-07-01

    ... surface coal mining operations. 912.764 Section 912.764 Mineral Resources OFFICE OF SURFACE MINING... WITHIN EACH STATE IDAHO § 912.764 Process for designating areas unsuitable for surface coal mining... coal mining and reclamation operations. ...

  3. Publications of the Western Earth Surfaces Processes Team 2005

    Science.gov (United States)

    Powell, Charles; Stone, Paul

    2007-01-01

    Introduction The Western Earth Surface Processes Team (WESPT) of the U.S. Geological Survey (USGS) conducts geologic mapping, earth-surface process investigations, and related topical earth science studies in the western United States. This work is focused on areas where modern geologic maps and associated earth-science data are needed to address key societal and environmental issues such as ground-water quality, landslides and other potential geologic hazards, and land-use decisions. Areas of primary emphasis in 2005 included southern California, the San Francisco Bay region, the Mojave Desert, the Colorado Plateau region of northern Arizona, and the Pacific Northwest. The team has its headquarters in Menlo Park, California, and maintains smaller field offices at several other locations in the western United States. The results of research conducted by the WESPT are released to the public as a variety of databases, maps, text reports, and abstracts, both through the internal publication system of the USGS and in diverse external publications such as scientific journals and books. This report lists publications of the WESPT released in 2005 as well as additional 2002, 2003, and 2004 publications that were not included in the previous lists (USGS Open-File Reports 03-363, 2004- 1267, 2005-1362). Most of the publications listed were authored or coauthored by WESPT staff. The list also includes some publications authored by non-USGS cooperators with the WESPT, as well as some authored by USGS staff outside the WESPT in cooperation with WESPT projects. Several of the publications listed are available on the World Wide Web; for these, URL addresses are provided. Many of these web publications are USGS Open-File reports that contain large digital databases of geologic map and related information. Information on ordering USGS publications can be found on the World Wide Web at http://www.usgs.gov/pubprod/, or by calling 1-888-ASK-USGS. The U.S. Geological Survey's web

  4. Analysis of the current density characteristics in through-mask electrochemical micromachining (TMEMM for fabrication of micro-hole arrays on invar alloy film

    Directory of Open Access Journals (Sweden)

    Da-som JIN

    2017-06-01

    Full Text Available Invar alloy consisting of 64% iron and 36% nickel has been widely used for the production of shadow masks for organic light emitting diodes (OLEDs because of its low thermal expansion coefficient (1.86 × 10−6 cm/°C. To fabricate micro-hole arrays on 30 μm invar alloy film, through-mask electrochemical micromachining (TMEMM was developed and combined with a portion of the photolithography etching process. For precise hole shapes, patterned photoresist (PR film was applied as an insulating mask. To investigate the relationship between the current density and the material removal rate, the principle of the electrochemical machining was studied with a focus on the equation. The finite element method (FEM was used to verify the influence of each parameter on the current density on the invar alloy film surface. The parameters considered were the thickness of the PR mask, inter-electrode gap (IEG, and electrolyte concentration. Design of experiments (DOE was used to figure out the contribution of each parameter. A simulation was conducted with varying parameters to figure out their relationships with the current density. Optimization was conducted to select the suitable conditions. An experiment was carried out to verify the simulation results. It was possible to fabricate micro-hole arrays on invar alloy film using TMEMM, which is a promising method that can be applied to fabrications of OLEDs shadow masks.

  5. Photochemical Transformation Processes in Sunlit Surface Waters (Invited)

    Science.gov (United States)

    Vione, D.

    2013-12-01

    Photochemical reactions are major processes in the transformation of hardly biodegradable xenobiotics in surface waters. They are usually classified into direct photolysis and indirect or sensitised degradation. Direct photolysis requires xenobiotic compounds to absorb sunlight, and to get transformed as a consequence. Sensitised transformation involves reaction with transient species (e.g. °OH, CO3-°, 1O2 and triplet states of chromophoric dissolved organic matter, 3CDOM*), photogenerated by so-called photosensitisers (nitrate, nitrite and CDOM). CDOM is a major photosensitiser: is it on average the main source of °OH (and of CO3-° as a consequence, which is mainly produced upon oxidation by °OH of carbonate and bicarbonate) and the only important source of 1O2 and 3CDOM* [1, 2]. CDOM origin plays a key role in sensitised processes: allochthonous CDOM derived from soil runoff and rich in fulvic and humic substances is usually more photoactive than autochthonous CDOM (produced by in-water biological processes and mainly consisting of protein-like material) or of CDOM derived from atmospheric deposition. An interesting gradual evolution of CDOM origin and photochemistry can be found in mountain lakes across the treeline, which afford a gradual transition of allochthonous- autochtonous - atmopheric CDOM when passing from trees to alpine meadows to exposed rocks [3]. Another important issue is the sites of reactive species photoproduction in CDOM. While there is evidence that smaller molecular weight fractions are more photoactive, some studies have reported considerable 1O2 reactivity in CDOM hydrophobic sites and inside particles [4]. We have recently addressed the problem and found that dissolved species in standard humic acids (hydrodynamic diameter pollutants to be assessed and modelled. For instance, it is possible to predict pollutant half-life times by knowing absorption spectrum, direct photolysis quantum yield and reaction rate constants with °OH, CO3

  6. Etching characteristics of Si{110} in 20 wt% KOH with addition of hydroxylamine for the fabrication of bulk micromachined MEMS

    Science.gov (United States)

    Rao, A. V. Narasimha; Swarnalatha, V.; Pal, P.

    2017-12-01

    Anisotropic wet etching is a most widely employed for the fabrication of MEMS/NEMS structures using silicon bulk micromachining. The use of Si{110} in MEMS is inevitable when a microstructure with vertical sidewall is to be fabricated using wet anisotropic etching. In most commonly employed etchants (i.e. TMAH and KOH), potassium hydroxide (KOH) exhibits higher etch rate and provides improved anisotropy between Si{111} and Si{110} planes. In the manufacturing company, high etch rate is demanded to increase the productivity that eventually reduces the cost of end product. In order to modify the etching characteristics of KOH for the micromachining of Si{110}, we have investigated the effect of hydroxylamine (NH2OH) in 20 wt% KOH solution. The concentration of NH2OH is varied from 0 to 20% and the etching is carried out at 75 °C. The etching characteristics which are studied in this work includes the etch rates of Si{110} and silicon dioxide, etched surface morphology, and undercutting at convex corners. The etch rate of Si{110} in 20 wt% KOH + 15% NH2OH solution is measured to be four times more than that of pure 20 wt% KOH. Moreover, the addition of NH2OH increases the undercutting at convex corners and enhances the etch selectivity between Si and SiO2.

  7. Fly's proprioception-inspired micromachined strain-sensing structure: idea, design, modeling and simulation, and comparison with experimental results

    Science.gov (United States)

    Wicaksono, D. H. B.; Zhang, L.-J.; Pandraud, G.; French, P. J.; Vincent, J. F. V.

    2006-04-01

    A new strain-sensing structure inspired from insect's (especially the Fly) propricoception sensor is devised. The campaniform sensillum is a strain-sensing microstructure with very high sensitivity despite its small dimension (diameter ~10 µm in a relatively stiff material of insect's exocuticle (E = ~109 Pa). Previous work shows that the high sensitivity of this structure towards strain is due to its membrane-in-recess- and strainconcentrating- hole- features. Based on this inspiration, we built similar structure using silicon micromachining technology. Then a simple characterisation setup was devised. Here, we present briefly, finite-element modeling and simulation based on this actual sample preparation for the characterisation. As comparison and also to understand mechanical features responsible for the strain-sensitivity, we performed the modeling on different mechanical structures: bulk chunk, blind-hole, thorugh-hole, surface membrane, and membrane-in-recess. The actual experimental characterisation was performed previously using optical technique to membranein- recess micromachined Si structure. The FEM simulation results confirm that the bending stress and strain are concentrated in the hole-vicinity. The membrane inside the hole acts as displacement transducer. The FEM is in conformity with previous analytical results, as well as the optical characterisation result. The end goal is to build a new type MEMS strain sensor.

  8. Performance Enhancement of the Patch Antennas Applying Micromachining Technology

    Directory of Open Access Journals (Sweden)

    Mohamed N. Azermanesh

    2007-09-01

    Full Text Available This paper reports on the application of micromachining technology for performance enhancement of two types of compact antennas which are becoming a common practice in microsystems. Shorted patch antennas (SPA and folded shorted patch antennas operating in the 5-6 GHz ISM band, with intended application in short-range wireless communications, are considered. The electrical length of antennas are modified by etching the substrate of the antennas, thus providing a new degree of freedom to control the antenna operating properties, which is the main novelty of our work. The gain and bandwidth of the antennas are increased by increasing the etching depth. However, etching the substrate affects the operating frequency as well. To keep the operating frequency at a pre-specified value, the dimension of the antennas must be increased by deepening the etching depth. Therefore, a trade off between the performance enhancement of the antennas and the dimensional enlargement is required.

  9. Compact Micromachined Bandpass Filters for Infrared Planetary Spectroscopy

    Science.gov (United States)

    Brown, Ari D.; Aslam, Shahid; Chervenak, James A.; Huang, Wei-Chung; Merrell, Willie; Quijada, Manuel

    2011-01-01

    The thermal instrument strawman payload of the Jupiter Europa Orbiter on the Europa Jupiter Science Mission will map out thermal anomalies, the structure, and atmospheric conditions of Europa and Jupiter within the 7-100 micron spectral range. One key requirement for the payload is that the mass cannot exceed 3.7 kg. Consequently, a new generation of light-weight miniaturized spectrometers needs to be developed. On the path toward developing these spectrometers is development of ancillary miniaturized spectroscopic components. In this paper, we present a strategy for making radiation hard and low mass FIR band pass metal mesh filters. Our strategy involves using MEMS-based fabrication techniques, which will permit the quasi-optical filter structures to be made with micron-scale precision. This will enable us to achieve tight control over both the pass band of the filter and the micromachined silicon support structure architecture, which will facilitate integration of the filters for a variety of applications.

  10. Q-Switched Nd: YAG Laser Micro-Machining System

    International Nuclear Information System (INIS)

    Messaoud, S.; Allam, A.; Siserir, F.; Bouceta, Y.; Kerdja, T.; Ouadjaout, D.

    2008-01-01

    In this paper, we present the design of a low cost Q-switched Nd: YAG laser micro-machining system for photo masks fabrication. It consists of: Nd:YAG laser source, beam delivery system, X-Y table, PC, The CCD camera and TV monitor. The synchronization between the laser source and the X-Y table is realised by NI PCI-7342, the two axis MID-7602 and LabVIEW based program. The first step of this work consists of engraving continuous and discontinuous lines on a thin film metal with a 100 μm resolution by using the YG 980 Quantel Q-switched Nd:YAG laser.

  11. Micromachined hot-wire thermal conductivity probe for biomedical applications.

    Science.gov (United States)

    Yi, Ming; Panchawagh, Hrishikesh V; Podhajsky, Ronald J; Mahajan, Roop L

    2009-10-01

    This paper presents the design, fabrication, numerical simulation, and experimental validation of a micromachined probe that measures thermal conductivity of biological tissues. The probe consists of a pair of resistive line heating elements and resistance temperature detector sensors, which were fabricated by using planar photolithography on a glass substrate. The numerical analysis revealed that the thermal conductivity and diffusivity can be determined by the temperature response induced by the uniform heat flux in the heating elements. After calibrating the probe using a material (agar gel) of known thermal conductivity, the probe was deployed to calculate the thermal conductivity of Crisco. The measured value is in agreement with that determined by the macro-hot-wire probe method to within 3%. Finally, the micro thermal probe was used to investigate the change of thermal conductivity of pig liver before and after RF ablation treatment. The results show an increase in thermal conductivity of liver after the RF ablation.

  12. Characterization of a Silicon-Micromachined Thermal Shear-Stress Sensor

    National Research Council Canada - National Science Library

    Sheplak, Mark; Chandrasekaran, Venkataraman; Cain, Anthony; Nishida, Toshikazu; Cattafesta, Louis N

    2002-01-01

    A detailed characterization is presented of a silicon-micromachined thermal shear-stress sensor employing a thin-film platinum-sensing element on top of a silicon-nitride membrane that is stretched over a vacuum cavity...

  13. Electron beam processed plasticized epoxy coatings for surface protection

    International Nuclear Information System (INIS)

    Ibrahim, Mervat S.; Mohamed, Heba A.; Kandile, Nadia G.; Said, Hossam M.; Mohamed, Issa M.

    2011-01-01

    Highlights: · Coating formulations with EA 70%, HD 20%, and castor oil 10% under 1 Mrad pass -1 irradiation dose showed the best adhesion and passed bending tests. · The prepared EP-SF-An adduct improve anti-corrosion properties of coatings without any significant effect on physical, mechanical and chemical properties of the cured film. The optimum amount of aniline adduct as corrosion inhibitor was found to be 0.4 g for 100 g of coating formulation. · The corrosion inhibition efficiency of the prepared adduct competed the commercial efficiency. - Abstract: Epoxy acrylate oligomer (EA) was plasticized by adding different plasticizers such as epoxidized soybean oil, glycerol and castor oil and cured by electron beam (EB). Different irradiation doses (1, 2.5 and 5 Mrad pass -1 ) were used in the curing process. The effect of both different irradiation doses and plasticizers on the end use performance properties of epoxy acrylate coating namely, pencil hardness, bending test, adhesion test, acid and alkali resistance test were studied. It was observed that incorporation of castor oil in epoxy acrylate diluted by 1,6-hexanediol diacrylate (HD) monomer with a ratio (EA 70%, HD 20%, castor oil 10%) under 1 Mrad pass -1 irradiation dose improved the physical, chemical and mechanical properties of cured films than the other plasticizer. Sunflower free fatty acid was epoxidized in situ under well established conditions. The epoxidized sunflower free fatty acids (ESFA) were subjected to react with aniline in sealed ampoules under inert atmosphere at 140 deg. C. The produced adducts were added at different concentrations to epoxy acrylate coatings under certain EB irradiation dose and then evaluated as corrosion inhibitors for carbon steel surfaces in terms of weight loss measurements and corrosion resistance tests. It was found that, addition of 0.4 g of aniline adduct to 100 g epoxy acrylate formula may give the best corrosion protection for carbon steel and compete the

  14. Publications of Western Earth Surface Processes Team 2001

    Science.gov (United States)

    Powell, II; Graymer, R.W.

    2002-01-01

    The Western Earth Surface Processes Team (WESPT) of the U.S. Geological Survey (USGS) conducts geologic mapping and related topical earth-science studies in the Western United States. This work is focused on areas where modern geologic maps and associated earth-science data are needed to address key societal and environmental issues, such as ground-water quality, landslides and other potential geologic hazards, and land-use decisions. Areas of primary emphasis in 2001 included southern California, the San Francisco Bay region, the Pacific Northwest, and the Las Vegas urban corridor. The team has its headquarters in Menlo Park, California, and maintains smaller field offices at several other locations in the Western United States. The results of research conducted by the WESPT are released to the public as a variety of databases, maps, text reports, and abstracts, both through the internal publication system of the USGS and in diverse external publications such as scientific journals and books. This report lists publications of the WESPT released in 2001, as well as additional 1999 and 2000 publications that were not included in the previous list (USGS Open-File Report 00–215 and USGS Open-File Report 01–198). Most of the publications listed were authored or coauthored by WESPT staff. The list also includes some publications authored by non-USGS cooperators with the WESPT, as well as some authored by USGS staff outside the WESPT in cooperation with WESPT projects. Several of the publications listed are available on the World Wide Web; for these, URL addresses are provided. Many of these web publications are USGS Open-File Reports that contain large digital databases of geologic map and related information.

  15. Publications of the Western Earth Surface Processes Team 2000

    Science.gov (United States)

    Powell, Charles L.; Stone, Paul

    2001-01-01

    The Western Earth Surface Processes Team (WESP) of the U.S. Geological Survey (USGS) conducts geologic mapping and related topical earth science studies in the western United States. This work is focused on areas where modern geologic maps and associated earth-science data are needed to address key societal and environmental issues such as ground-water quality, potential geologic hazards, and land-use decisions. Areas of primary emphasis in 2000 included southern California, the San Francisco Bay region, the Pacific Northwest, the Las Vegas urban corridor, and selected National Park lands. The team has its headquarters in Menlo Park, California, and maintains smaller field offices at several other locations in the western United States. The results of research conducted by the WESPT are released to the public as a variety of databases, maps, text reports, and abstracts, both through the internal publication system of the USGS and in diverse external publications such as scientific journals and books. This report lists publications of the WESPT released in 2000 as well as additional 1999 publications that were not included in the previous list (USGS Open-file Report 00-215). Most of the publications listed were authored or coauthored by WESPT staff. The list also includes some publications authored by non-USGS cooperators with the WESPT, as well as some authored by USGS staff outside the WESPT in cooperation with WESPT projects. Several of the publications listed are available on the World Wide Web; for these, URL addresses are provided. Many of these Web publications are USGS open-file reports that contain large digital databases of geologic map and related information.

  16. Laser micro-machined semi-slinky like MEMS structures: Novel interface coolers

    Science.gov (United States)

    Çelen, Serap

    2012-10-01

    Laser micro-machining has recently been considered a precision and reproducible manufacturing technique in MEMS fabrication because of the superior characteristics of a focused laser beam. It is not only a unique tool but also an invisible optical drill. The aim of the present paper is two-fold: to manufacture novel miniaturized titanium 3D MEMS surface structures in order to increase the cooling performance. Second is to find the behaviors of the operational parameters which controlling the laser-material interaction mechanisms and also suggest the best adjustments in order to achieve this novel semi-slinky like spiral MEMS surface structures with using a 20 W ytterbium fiber laser. Pure titanium micro-MEMS product which has novel interface coolers was manufactured using a ytterbium fiber laser (λ=1060 nm) with 40 ns pulse duration. Best adjustments were, respectively, the pulse duration: 40 ns, the pulse energy: 0.4 mJ, the laser scanning speed: 336.1 mm/s, the peak power density: 17.46 * 108 W/cm2.

  17. Free-standing double-layer terahertz band-pass filters fabricated by femtosecond laser micro-machining.

    Science.gov (United States)

    Lin, Yanzhang; Yao, Haizi; Ju, Xuewei; Chen, Ying; Zhong, Shuncong; Wang, Xiangfeng

    2017-10-16

    We report on the fabrication and transmission properties of free-standing single-layer and double-layer THz bandpass filters. These filters are fabricated on aluminum foils using femtosecond laser micro-machining. The aluminum foils are periodically patterned with cross apertures with a total area of 1.75×1.75 cm 2 , also known as frequency-selective surfaces. Their terahertz transmission properties were simulated using the FDTD method and measured using a time-domain terahertz spectroscopy system. The simulation results agree with the measurements results very well. The performance of single-layer bandpass filters is as good as the commercial equivalents on the market. The double-layer filters show extraordinary transmission peaks with changing spacing between the two layers. We show the contour map of the electric field distribution across the apertures, and ascribe the new transmission peaks to the interference and coupling of surface plasmon polaritons between the two layers.

  18. Micromachined thin-film sensors for SOI-CMOS co-integration

    CERN Document Server

    Laconte, Jean; Raskin, Jean-Pierre

    2006-01-01

    Co-integration of MEMS and MOS in SOI technology is promising and well demonstrated hereThe impact of Micromachining on SOI devices is deeply analyzed for the first timeInclude extensive TMAH etching, residual stress, microheaters, gas-flow sensors reviewResidual stresses in thin films need to be more and more monitored in MEMS designsTMAH micromachining is an attractive alternative to KOH.

  19. Short-pulse-width micromachining of hard materials using DPSS Nd:YAG lasers

    Science.gov (United States)

    Heglin, Michael; Govorkov, Sergei V.; Scaggs, Michael J.; Theoharidis, Haris; Schoelzel, T.

    2002-06-01

    The material processing of an industrial, short-pulse duration DPPS YAG laser producing peak powers greater than 0.2MW is discussed in this paper. This peak power provides sufficient materials processing capability to meet the micro machining needs in the automotive, semiconductor, micro- electronic, medical and telecommunication industries. All hard and soft materials including: plastics, metals, ceramics, diamond and other crystalline materials are suitable candidates for the processing capability of this laser. Micro level features can be machined in these materials to a depth in excess of 1mm with high quality results. In most applications feature sizes can be achieved that are not possible or economical with existing technologies. The optical beam delivery system requirements, and overall micro-machining set-up are also described. The drilling and cutting versatility down to feature sizes of less than 7 micrometers , as well as, complex shapes are shown. The wavelength, pulse length, and peakpower are described and relate to their effect on recast, micro-cracking and material removal rates. Material removal effects related to progressive penetration into the material will be reviewed. The requirements of this DPSS laser technology to meet the operational requirements for high duty cycle operation in industrial environments is covered along with processing flexibility and lower operating cost.

  20. Publications of the Western Earth Surface Processes Team 2002

    Science.gov (United States)

    Powell, Charles; Graymer, R.W.

    2003-01-01

    The Western Earth Surface Processes Team (WESPT) of the U.S. Geological Survey (USGS) conducts geologic mapping and related topical earth science studies in the western United States. This work is focused on areas where modern geologic maps and associated earth-science data are needed to address key societal and environmental issues such as ground-water quality, landslides and other potential geologic hazards, and land-use decisions. Areas of primary emphasis in 2001 included southern California, the San Francisco Bay region, the Pacific Northwest, and the Las Vegas urban corridor. The team has its headquarters in Menlo Park, California, and maintains smaller field offices at several other locations in the western United States. The results of research conducted by the WESPT are released to the public as a variety of databases, maps, text reports, and abstracts, both through the internal publication system of the USGS and in diverse external publications such as scientific journals and books. This report lists publications of the WESPT released in 2002 as well as additional 1998 and 2001 publications that were not included in the previous list (USGS Open-File Report 00-215, USGS Open-File Report 01-198, and USGS Open-File Report 02-269). Most of the publications listed were authored or coauthored by WESPT staff. The list also includes some publications authored by non-USGS cooperators with the WESPT, as well as some authored by USGS staff outside the WESPT in cooperation with WESPT projects. Several of the publications listed are available on the World Wide Web; for these, URL addresses are provided. Many of these web publications are USGS open-file reports that contain large digital databases of geologic map and related information. Information on ordering USGS publications can be found on the World Wide Web or by calling 1-888-ASK-USGS. The U.S. Geological Survey’s web server for geologic information in the western United States is located at http

  1. Electron beam processed plasticized epoxy coatings for surface protection

    Energy Technology Data Exchange (ETDEWEB)

    Ibrahim, Mervat S. [National Center for Radiation Research and Technology, Nasr City (Egypt); Mohamed, Heba A., E-mail: hebaamohamed@gmail.com [National Research Center, Dokki (Egypt); Kandile, Nadia G. [University College for Girls, Ain Shams University (Egypt); Said, Hossam M.; Mohamed, Issa M. [National Center for Radiation Research and Technology, Nasr City (Egypt)

    2011-10-17

    Highlights: {center_dot} Coating formulations with EA 70%, HD 20%, and castor oil 10% under 1 Mrad pass{sup -1} irradiation dose showed the best adhesion and passed bending tests. {center_dot} The prepared EP-SF-An adduct improve anti-corrosion properties of coatings without any significant effect on physical, mechanical and chemical properties of the cured film. The optimum amount of aniline adduct as corrosion inhibitor was found to be 0.4 g for 100 g of coating formulation. {center_dot} The corrosion inhibition efficiency of the prepared adduct competed the commercial efficiency. - Abstract: Epoxy acrylate oligomer (EA) was plasticized by adding different plasticizers such as epoxidized soybean oil, glycerol and castor oil and cured by electron beam (EB). Different irradiation doses (1, 2.5 and 5 Mrad pass{sup -1}) were used in the curing process. The effect of both different irradiation doses and plasticizers on the end use performance properties of epoxy acrylate coating namely, pencil hardness, bending test, adhesion test, acid and alkali resistance test were studied. It was observed that incorporation of castor oil in epoxy acrylate diluted by 1,6-hexanediol diacrylate (HD) monomer with a ratio (EA 70%, HD 20%, castor oil 10%) under 1 Mrad pass{sup -1} irradiation dose improved the physical, chemical and mechanical properties of cured films than the other plasticizer. Sunflower free fatty acid was epoxidized in situ under well established conditions. The epoxidized sunflower free fatty acids (ESFA) were subjected to react with aniline in sealed ampoules under inert atmosphere at 140 deg. C. The produced adducts were added at different concentrations to epoxy acrylate coatings under certain EB irradiation dose and then evaluated as corrosion inhibitors for carbon steel surfaces in terms of weight loss measurements and corrosion resistance tests. It was found that, addition of 0.4 g of aniline adduct to 100 g epoxy acrylate formula may give the best corrosion

  2. Triangle geometry processing for surface modeling and cartesian grid generation

    Science.gov (United States)

    Aftosmis, Michael J [San Mateo, CA; Melton, John E [Hollister, CA; Berger, Marsha J [New York, NY

    2002-09-03

    Cartesian mesh generation is accomplished for component based geometries, by intersecting components subject to mesh generation to extract wetted surfaces with a geometry engine using adaptive precision arithmetic in a system which automatically breaks ties with respect to geometric degeneracies. During volume mesh generation, intersected surface triangulations are received to enable mesh generation with cell division of an initially coarse grid. The hexagonal cells are resolved, preserving the ability to directionally divide cells which are locally well aligned.

  3. Microstructural and hardness gradients in Cu processed by high pressure surface rolling

    DEFF Research Database (Denmark)

    He, Q. Y.; Zhu, X.-M.; Mei, Q. S.

    2017-01-01

    The surface of an annealed Cu plate was processed by a high pressure surface rolling (HPSR) process. It is found that the deformed surface layer in the Cu plate after HPSR can be as thick as 2 mm and is characterized by a gradient microstructure, with grain sizes varying from the nanoscale...

  4. Manufacture of functional surfaces through combined application of tool manufacturing processes and Robot Assisted Polishing

    DEFF Research Database (Denmark)

    Eriksen, Rasmus Solmer; Arentoft, Mogens; Grønbæk, J.

    2012-01-01

    The tool surface topography is often a key parameter in the tribological performance of modern metal forming tools. A new generation of multifunctional surfaces is achieved by combination of conventional tool manufacturing processes with a novel Robot Assisted Polishing process. This novel surface...

  5. 30 CFR 910.764 - Process for designating areas unsuitable for surface coal mining operations.

    Science.gov (United States)

    2010-07-01

    ... surface coal mining operations. 910.764 Section 910.764 Mineral Resources OFFICE OF SURFACE MINING RECLAMATION AND ENFORCEMENT, DEPARTMENT OF THE INTERIOR PROGRAMS FOR THE CONDUCT OF SURFACE MINING OPERATIONS WITHIN EACH STATE GEORGIA § 910.764 Process for designating areas unsuitable for surface coal mining...

  6. 30 CFR 937.764 - Process for designating areas unsuitable for surface coal mining operations.

    Science.gov (United States)

    2010-07-01

    ... surface coal mining operations. 937.764 Section 937.764 Mineral Resources OFFICE OF SURFACE MINING RECLAMATION AND ENFORCEMENT, DEPARTMENT OF THE INTERIOR PROGRAMS FOR THE CONDUCT OF SURFACE MINING OPERATIONS WITHIN EACH STATE OREGON § 937.764 Process for designating areas unsuitable for surface coal mining...

  7. 30 CFR 922.764 - Process for designating areas unsuitable for surface coal mining operations.

    Science.gov (United States)

    2010-07-01

    ... surface coal mining operations. 922.764 Section 922.764 Mineral Resources OFFICE OF SURFACE MINING RECLAMATION AND ENFORCEMENT, DEPARTMENT OF THE INTERIOR PROGRAMS FOR THE CONDUCT OF SURFACE MINING OPERATIONS WITHIN EACH STATE MICHIGAN § 922.764 Process for designating areas unsuitable for surface coal mining...

  8. 30 CFR 942.764 - Process for designating areas unsuitable for surface coal mining operations.

    Science.gov (United States)

    2010-07-01

    ... surface coal mining operations. 942.764 Section 942.764 Mineral Resources OFFICE OF SURFACE MINING... WITHIN EACH STATE TENNESSEE § 942.764 Process for designating areas unsuitable for surface coal mining... Mining Operations, shall apply to surface coal mining and reclamation operations. (b) The Secretary shall...

  9. 30 CFR 941.764 - Process for designating areas unsuitable for surface coal mining operations.

    Science.gov (United States)

    2010-07-01

    ... surface coal mining operations. 941.764 Section 941.764 Mineral Resources OFFICE OF SURFACE MINING RECLAMATION AND ENFORCEMENT, DEPARTMENT OF THE INTERIOR PROGRAMS FOR THE CONDUCT OF SURFACE MINING OPERATIONS WITHIN EACH STATE SOUTH DAKOTA § 941.764 Process for designating areas unsuitable for surface coal mining...

  10. 30 CFR 939.764 - Process for designating areas unsuitable for surface coal mining operations.

    Science.gov (United States)

    2010-07-01

    ... surface coal mining operations. 939.764 Section 939.764 Mineral Resources OFFICE OF SURFACE MINING RECLAMATION AND ENFORCEMENT, DEPARTMENT OF THE INTERIOR PROGRAMS FOR THE CONDUCT OF SURFACE MINING OPERATIONS WITHIN EACH STATE RHODE ISLAND § 939.764 Process for designating areas unsuitable for surface coal mining...

  11. Nano surface generation of grinding process using carbon nano tubes

    Indian Academy of Sciences (India)

    holes need different processing techniques. Conventional finishing methods used so far become almost impossible or cumbersome. In this paper, a nano material especially multi wall carbon nano tube is used in the machining process like ...

  12. Lunar rock surfaces as detectors of solar processes

    International Nuclear Information System (INIS)

    Hartung, J.B.; Hunter College, New York, NY)

    1980-01-01

    Lunar rock surfaces exposed at or just below the lunar surface are considered as detectors of the solar wind, solar flares and solar-derived magnetic fields through their interactions with galactic cosmic rays. The degradation of the solar detector capabilities of lunar surface rocks by meteoroid impact erosion, accreta deposition, loose dust, and sputtering, amorphous layer formation and accelerated diffusion due to solar particles and illumination is discussed, and it is noted that the complex interactions of factors affecting the outer micron of exposed surface material has so far prevented the development of a satisfactory model for a particle detector on the submicron scale. Methods for the determination of surface exposure ages based on the accumulation of light solar wind noble gases, Fe and Mg, impact craters, solar flare tracks, and cosmogenic Kr isotopes are examined, and the systematic variations in the ages determined by the various clocks are discussed. It is concluded that a means of obtaining satisfactory quantitative rate or flux data has not yet been established

  13. Acoustic emission-based in-process monitoring of surface generation in robot-assisted polishing

    DEFF Research Database (Denmark)

    Pilny, Lukas; Bissacco, Giuliano; De Chiffre, Leonardo

    2016-01-01

    The applicability of acoustic emission (AE) measurements for in-process monitoring of surface generation in the robot-assisted polishing (RAP) was investigated. Surface roughness measurements require interruption of the process, proper surface cleaning and measurements that sometimes necessitate......-process determination of the process endpoint. This makes it possible to reliably determine the right time for changing the polishing media to finer abrasive when applying a given set of parameters is no longer effective to create a smoother surface, thus improving the efficiency of the process. The findings enabling...

  14. Process chain for fabrication of anisotropic optical functional surfaces on polymer components

    DEFF Research Database (Denmark)

    Li, Dongya; Zhang, Yang; Regi, Francesco

    2017-01-01

    This paper aims to introduce a process chain for fabrication of anisotropic optical functional surfaces on polymer products. Thesurface features under investigation are composed of micro serrated ridges. The scope was to maximize the visible contrast betweenhorizontally orthogonal textured surfaces...

  15. Micromachining of Al2O3-TiC ceramics by excimer laser

    Directory of Open Access Journals (Sweden)

    Oliveira, V.

    1998-04-01

    Full Text Available Micromachining of Al2O3-TiC ceramic using a KrF excimer laser was studied in the fluence range 2 to 8 J/cm2 . The ablation rate decreases and the roughness increases with the first pulses but after about 200 pulses the process reaches a stationary stage where both roughness and ablation rate become constant. Observation of the processed areas by scanning electron microscopy showed that a globular topography is formed during the first stage and that the surface topography remains unchanged with further pulses. This globular topography is responsible for the variation of roughness and ablation rate observed during the first stage. EDS analysis showed that the globular features present an external region with higher titanium content and a core formed of unaffected material.

    Se estudia el micromecanizado de cerámicas Al2O3-TiC mediante un láser de excímero de KrF con un rango de fluencia de 2 a 8 J/cm2 . La velocidad de ablación disminuye y la rugosidad aumenta con los primeros pulsos. Sin embargo, después de 200 pulsos, el proceso alcanza el régimen estacionario, donde tanto la rugosidad como la velocidad de ablación permanecen constantes. La observación mediante SEM de determinadas áreas mostraban una topografía globular formada durante la primera etapa, mientras que con los siguientes pulsos permanece in cambios. Esta topografía globular es responsable de la variación de rugosidad y de la velocidad de ablación observada durante las primeras etapas del proceso. Los análisis de EDS sobre las zonas globulares mostraron la existencia de una región externa rica en titanio y un núcleo formado por el material sin afectar.

  16. Effect of finishing process on the surface quality of Co-Cr-Mo dental alloys

    Directory of Open Access Journals (Sweden)

    Dorota Klimecka -Tatar

    2016-09-01

    Full Text Available Preparatory procedures for the material have a significant influence on the surface stereometry of the material. This study investigated the effect of the electropolishing process on the surface quality of metallic prosthetic constructions based on Co-Cr-Mo alloys. It has been found that the process of electropolishing prevents to excessive development of the surface of a material and consequently improves surface quality.

  17. Shewanella putrefaciens adhesion and biofilm formation on food processing surfaces

    DEFF Research Database (Denmark)

    Bagge, Dorthe; Hjelm, M.; Johansen, C.

    2001-01-01

    of bacteria on the surface must be quantified to evaluate the influence of environmental factors on adhesion and biofilm formation. We used a combination of fluorescence microscopy (4',6'-diamidino-2-phenylindole staining and in situ hybridization, for mixed-culture studies), ultrasonic removal of bacteria...

  18. Nano surface generation of grinding process using carbon nano tubes

    Indian Academy of Sciences (India)

    Nano surface finish has become an important parameter in the semiconductor, optical, electrical and mechanical industries. The materials used in these industries are classified as difficult to machine materials such as ceramics, glasses and silicon wafers. Machining of these materials up to nano accuracy is a great ...

  19. Hypersonic force measurements using internal balance based on optical micromachined Fabry-Perot interferometry

    Science.gov (United States)

    Qiu, Huacheng; Min, Fu; Zhong, Shaolong; Song, Xin; Yang, Yanguang

    2018-03-01

    Force measurements using wind tunnel balance are necessary for determining a variety of aerodynamic performance parameters, while the harsh environment in hypersonic flows requires that the measurement instrument should be reliable and robust, in against strong electromagnetic interference, high vacuum, or metal (oxide) dusts. In this paper, we demonstrated a three-component internal balance for hypersonic aerodynamic force measurements, using novel optical micromachined Fabry-Perot interferometric (FPI) strain gauges as sensing elements. The FPI gauges were fabricated using Micro-Opto-Electro-Mechanical Systems (MOEMS) surface and bulk fabrication techniques. High-reflectivity coatings are used to form a high-finesse Fabry-Perot cavity, which benefits a high resolution. Antireflective and passivation coatings are used to reduce unwanted interferences. The FPI strain gauge based balance has been calibrated and evaluated in a Mach 5 hypersonic flow. The results are compared with the traditional technique using the foil resistive strain gauge balance, indicating that the proposed balance based on the MOEMS FPI strain gauge is reliable and robust and is potentially suitable for the hypersonic wind tunnel harsh environment.

  20. Surface enhancement of cold work tool steels by friction stir processing with a pinless tool

    Science.gov (United States)

    Costa, M. I.; Verdera, D.; Vieira, M. T.; Rodrigues, D. M.

    2014-03-01

    The microstructure and mechanical properties of enhanced tool steel (AISI D2) surfaces produced using a friction stir welding (FSW) related procedure, called friction stir processing (FSP), are analysed in this work. The surface of the tool steel samples was processed using a WC-Co pinless tool and varying processing conditions. Microstructural analysis revealed that meanwhile the original substrate structure consisted of a heterogeneous distribution of coarse carbides in a ferritic matrix, the transformed surfaces consisted of very small carbides, homogenously distributed in a ferrite- bainite- martensite matrix. The morphology of the surfaces, as well as its mechanical properties, evaluated by hardness and tensile testing, were found to vary with increasing tool rotation speed. Surface hardness was drastically increased, relative to the initial hardness of bulk steel. This was attributed to ferrite and carbide refinement, as well as to martensite formation during solid state processing. At the highest rotation rates, tool sliding during processing deeply compromised the characteristics of the processed surfaces.

  1. Analysis and research on curved surface's prototyping error based on FDM process

    Science.gov (United States)

    Gong, Y. D.; Zhang, Y. C.; Yang, T. B.; Wang, W. S.

    2008-12-01

    Analysis and research methods on curved surface's prototyping error with FDM (Fused Deposition Modeling) process are introduced in this paper, then the experiment result of curved surface's prototyping error is analyzed, and the integrity of point cloud information and the fitting method of curved surface prototyping are discussed as well as the influence on curved surface's prototyping error with different software. Finally, the qualitative and quantitative conclusions on curved surface's prototyping error are acquired in this paper.

  2. Anodic bonding using SOI wafer for fabrication of capacitive micromachined ultrasonic transducers

    International Nuclear Information System (INIS)

    Bellaredj, M; Bourbon, G; Walter, V; Moal, P Le; Berthillier, M

    2014-01-01

    In medical ultrasound imaging, mostly piezoelectric crystals are used as ultrasonic transducers. Capacitive micromachined ultrasonic transducers (CMUTs) introduced around 1994 have been shown to be a good alternative to conventional piezoelectric transducers in various aspects, such as sensitivity, transduction efficiency or bandwidth. This paper focuses on a fabrication process for CMUTs using anodic bonding of a silicon on insulator wafer on a glass wafer. The processing steps are described leading to a good control of the mechanical response of the membrane. This technology makes possible the fabrication of large membranes and can extend the frequency range of CMUTs to lower frequencies of operation. Silicon membranes having radii of 50, 70, 100 and 150 µm and a 1.5 µm thickness are fabricated and electromechanically characterized using an auto-balanced bridge impedance analyzer. Resonant frequencies from 0.6 to 2.3 MHz and an electromechanical coupling coefficient around 55% are reported. The effects of residual stress in the membranes and uncontrolled clamping conditions are clearly responsible for the discrepancies between experimental and theoretical values of the first resonance frequency. The residual stress in the membranes is determined to be between 90 and 110 MPa. The actual boundary conditions are between the clamped condition and the simply supported condition and can be modeled with a torsional stiffness of 2.10 −7  Nm rad –1  in the numerical model. (paper)

  3. Experimental Study of the Ultrasonic Vibration-Assisted Abrasive Waterjet Micromachining the Quartz Glass

    Directory of Open Access Journals (Sweden)

    Rongguo Hou

    2018-01-01

    Full Text Available The ultrasonic vibration is used to enhance the capability of the abrasive water micromachining glass. And, the ultrasonic vibration is activated on the abrasive waterjet nozzle. The quality of the flow is improved, and the velocity of the abrasive is increased because of the addition of the ultrasonic energy. The relevant experimental results indicate that the erosion depth and the material volume removal of the glass are obviously increased when ultrasonic vibration is working. As for the influence of process parameters on the material removal of the glass such as vibration amplitude, system pressure, distance of the standoff, and abrasive size, the experimental results indicate that the system pressure and vibration contribute greatly to the glass material removal. Also, the erosion depth and the volume of material removal are increased with the increase in the vibration amplitude and system pressure. There are some uplifts found at the edge of erosion pit. Then, it can be inferred that the plastic method is an important material removal method during the machining process of ultrasonic vibration-assisted abrasive waterjet.

  4. Modeling the Microstructure Curvature of Boron-Doped Silicon in Bulk Micromachined Accelerometer

    Directory of Open Access Journals (Sweden)

    Xiaoping He

    2013-01-01

    Full Text Available Microstructure curvature, or buckling, is observed in the micromachining of silicon sensors because of the doping of impurities for realizing certain electrical and mechanical processes. This behavior can be a key source of error in inertial sensors. Therefore, identifying the factors that influence the buckling value is important in designing MEMS devices. In this study, the curvature in the proof mass of an accelerometer is modeled as a multilayered solid model. Modeling is performed according to the characteristics of the solid diffusion mechanism in the bulk-dissolved wafer process (BDWP based on the self-stopped etch technique. Moreover, the proposed multilayered solid model is established as an equivalent composite structure formed by a group of thin layers that are glued together. Each layer has a different Young’s modulus value and each undergoes different volume shrinkage strain owing to boron doping in silicon. Observations of five groups of proof mass blocks of accelerometers suggest that the theoretical model is effective in determining the buckling value of a fabricated structure.

  5. Fiscal 1996 report on technological results. R and D on micromachine technology; 1996 nendo micromachine gijutsu no kenkyu kaihatsu seika hokokusho

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1998-03-01

    Researches on basic element technology of micromachines are conducted that operate autonomously in a narrow small part in a complicated apparatus or in vivo. The areas of activity are (1) research on micromachine systems, (2) a subminiature liquid synthesizing system, and (3) comprehensive investigation and research. In (1), the researches were carried out on the miniaturization and functional combination of a micro laser catheter and a micro tactile sensor catheter, which are the primary components of a coeliac diagnostic and therapeutic system, a 'micro catheter for cerebral blood vessel/treatment', as a micromachine system in the medical field. In (2), R and D was conducted on a system element technology assuming it contributed to a subminiature liquid synthesizing system capable of preparing various liquids including pharmaceuticals accurately with a trace amount. In (3), examination was made on the application area of a micromachine system with priority given to a medical field and also on technological subjects to be tapped, as well as on the contents of (2), with a device installed for evaluating the operating characteristic of a distribution type fluid actuator as needed for the development. (NEDO)

  6. Prospects of DLC coating as environment friendly surface treatment process.

    Science.gov (United States)

    Kim, S W; Kim, S G

    2011-06-01

    After first commercialization in 90's, the applications of diamond-like carbon (DLC) have been significantly expanded to tool, automobile parts, machineries and moulds to enhance wear and friction properties. Although DLC has many advantages like high hardness, low friction electrical insulating and chemical stability and has the possible market, its application in the field is still very limited due to the gaps of understanding between end-user and developer of its advantage of costing. Recently, one of the most popular issues in the surface modification is providing the long lasting super-hydrophilic or -hydrophobic properties on the material surface for the outdoor usage. A lot of material loss is caused due to water corrosion which has to do with the flow and contacts of water like fuel cell separator and air conditioner parts. The consequence of development of functional surface based on the hydrophilic or hydrophobic design for the important parts would be really helpful for materials to be cleaner and more energy effective. Here, we first reviewed the DLC technology and then examined the kind of surface modification as well as its merits and disadvantage. We also looked at how we can improve super-hydrophilic and super hydrophobic for the DLC coating layer as well as current status of technology and arts of DLC. In the end, we would like to suggest it as one of the environmental friendly industrial technology. Copyright © 2011 The Research Centre for Eco-Environmental Sciences, Chinese Academy of Sciences. Published by Elsevier B.V. All rights reserved.

  7. Laser surface processing with controlled nitrogen-argon concentration levels for regulated surface life time

    Science.gov (United States)

    Obeidi, M. Ahmed; McCarthy, E.; Brabazon, D.

    2018-03-01

    Laser surface modification can be used to enhance the mechanical properties of a material, such as hardness, toughness, fatigue strength, and corrosion resistance. Surface nitriding is a widely used thermochemical method of surface modification, in which nitrogen is introduced into a metal or other material at an elevated temperature within a furnace. It is used on parts where there is a need for increased wear resistance, corrosion resistance, fatigue life, and hardness. Laser nitriding is a novel method of nitriding where the surface is heated locally by a laser, either in an atmosphere of nitrogen or with a jet of nitrogen delivered to the laser heated site. It combines the benefits of laser modification with those of nitriding. Recent work on high toughness tool steel samples has shown promising results due to the increased nitrogen gas impingement onto the laser heated region. Increased surface activity and nitrogen adsorption was achieved which resulted in a deeper and harder surface compared to conventional hardening methods. In this work, the effects of the laser power, pulse repetition frequency, and overlap percentage on laser surface treatment of 316 L SST steel samples with an argon-nitrogen jet will be presented. Resulting microstructure, phase type, microhardness, and wear resistance are presented.

  8. Thin film surface processing by ultrashort laser pulses (USLP)

    Science.gov (United States)

    Scorticati, D.; Skolski, J. Z. P.; Römer, G. R. B. E.; Huis in't Veld, A. J.; Workum, M.; Theelen, M.; Zeman, M.

    2012-06-01

    In this work, we studied the feasibility of surface texturing of thin molybdenum layers on a borosilicate glass substrate with Ultra-Short Laser Pulses (USLP). Large areas of regular diffraction gratings were produced consisting of Laserinduced periodic surface structures (LIPSS). A short pulsed laser source (230 fs-10 ps) was applied using a focused Gaussian beam profile (15-30 μm). Laser parameters such as fluence, overlap (OL) and Overscans (OS), repetition frequency (100-200 kHz), wavelength (1030 nm, 515 nm and 343 nm) and polarization were varied to study the effect on periodicity, height and especially regularity of LIPSS obtained in layers of different thicknesses (150-400 nm). The aim was to produce these structures without cracking the metal layer and with as little ablation as possible. It was found that USLP are suitable to reach high power densities at the surface of the thin layers, avoiding mechanical stresses, cracking and delamination. A possible photovoltaic (PV) application could be found in texturing of thin film cells to enhance light trapping mechanisms.

  9. Facile preparation of self-healing superhydrophobic CeO2 surface by electrochemical processes

    Science.gov (United States)

    Nakayama, Katsutoshi; Hiraga, Takuya; Zhu, Chunyu; Tsuji, Etsushi; Aoki, Yoshitaka; Habazaki, Hiroki

    2017-11-01

    Herein we report simple electrochemical processes to fabricate a self-healing superhydrophobic CeO2 coating on Type 304 stainless steel. The CeO2 surface anodically deposited on flat stainless steel surface is hydrophilic, although high temperature-sintered and sputter-deposited CeO2 surface was reported to be hydrophobic. The anodically deposited hydrophilic CeO2 surface is transformed to hydrophobic during air exposure. Specific accumulation of contaminant hydrocarbon on the CeO2 surface is responsible for the transformation to hydrophobic state. The deposition of CeO2 on hierarchically rough stainless steel surface produces superhydrophobic CeO2 surface, which also shows self-healing ability; the surface changes to superhydrophilic after oxygen plasma treatment but superhydrophobic state is recovered repeatedly by air exposure. This work provides a facile method for preparing a self-healing superhydrophobic surface using practical electrochemical processes.

  10. Improvement in Surface Characterisitcs of Polymers for Subsequent Electroless Plating Using Liquid Assisted Laser Processing

    DEFF Research Database (Denmark)

    Marla, Deepak; Zhang, Yang; Jabbaribehnam, Mirmasoud

    2016-01-01

    Metallization of polymers is a widely used process in the electronic industry that involves their surface modification as a pre-treatment step. Laser-based surface modification is one of the commonly used techniques for polymers due to its speed and precision. The process involves laser heating...... of the polymer surface to generate a rough or porous surface. Laser processing in liquid generates superior surface characteristics that result in better metal deposition. In this study, a comparison of the surface characteristics obtained by laser processing in water vis-à-vis air along with the deposition...... characteristics are presented. In addition, a numerical model based on the finite volume method is developed to predict the temperature profile during the process. Based on the model results, it is hypothesized that physical phenomena such as vapor bubble generation and plasma formation may occur in the presence...

  11. Surface gas-exchange processes of snow algae

    OpenAIRE

    Williams, William E.; Gorton, Holly L.; Vogelmann, Thomas C.

    2003-01-01

    The red-colored chlorophyte Chlamydomonas nivalis is commonly found in summer snowfields. We used a modified Li-Cor gas-exchange system to investigate surface gas-exchange characteristics of snow colonized by this alga, finding rates of CO2 uptake up to 0.3 μmol m−2⋅s−1 in dense algal blooms. Experiments varying the irradiance resulted in light curves that resembled those of the leaves of higher plants. Red light was more effective than white and much more effective than green or blue, becaus...

  12. Stochastic Modeling and Deterministic Limit of Catalytic Surface Processes

    DEFF Research Database (Denmark)

    Starke, Jens; Reichert, Christian; Eiswirth, Markus

    2007-01-01

    Three levels of modeling, microscopic, mesoscopic and macroscopic are discussed for the CO oxidation on low-index platinum single crystal surfaces. The introduced models on the microscopic and mesoscopic level are stochastic while the model on the macroscopic level is deterministic. It can......, such that in contrast to the microscopic model the spatial resolution is reduced. The derivation of deterministic limit equations is in correspondence with the successful description of experiments under low-pressure conditions by deterministic reaction-diffusion equations while for intermediate pressures phenomena...

  13. Statistical and signal processing concepts in surface metrology

    International Nuclear Information System (INIS)

    Church, E.L.; Takacs, P.Z.

    1986-01-01

    This paper proposes the use of a simple two-scale model of surface roughness for testing and specifying the topographic figure and finish of synchrotron-radiation mirrors. In this approach the effects of figure and finish are described in terms of their slope distribution and power spectrum, respectively, which are then combined with the system point spread function to produce a composite image. The result can be used to predict mirror performance or to translate design requirements into manufacturing specifications. Pacing problems in this approach are the development of a practical long-trace slope-profiling instrument and realistic statistical models for figure and finish errors

  14. Giant flexoelectric polarization in a micromachined ferroelectric diaphragm

    KAUST Repository

    Wang, Zhihong

    2012-08-14

    The coupling between dielectric polarization and strain gradient, known as flexoelectricity, becomes significantly large on the micro- and nanoscale. Here, it is shown that giant flexoelectric polarization can reverse remnant ferroelectric polarization in a bent Pb(Zr0.52Ti0.48) O3 (PZT) diaphragm fabricated by micromachining. The polarization induced by the strain gradient and the switching behaviors of the polarization in response to an external electric field are investigated by observing the electromechanical coupling of the diaphragm. The method allows determination of the absolute zero polarization state in a PZT film, which is impossible using other existing methods. Based on the observation of the absolute zero polarization state and the assumption that bending of the diaphragm is the only source of the self-polarization, the upper bound of flexoelectric coefficient of PZT film is calculated to be as large as 2.0 × 10-4 C m -1. The strain gradient induced by bending the diaphragm is measured to be on the order of 102 m-1, three orders of magnitude larger than that obtained in the bulk material. Because of this large strain gradient, the estimated giant flexoelectric polarization in the bent diaphragm is on the same order of magnitude as the normal remnant ferroelectric polarization of PZT film. Copyright © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

  15. Review of piezoelectric micromachined ultrasonic transducers and their applications

    Science.gov (United States)

    Jung, Joontaek; Lee, Wonjun; Kang, Woojin; Shin, Eunjung; Ryu, Jungho; Choi, Hongsoo

    2017-11-01

    In recent decades, micromachined ultrasonic transducers (MUTs) have been investigated as an alternative to conventional piezocomposite ultrasonic transducers, primarily due to the advantages that microelectromechanical systems provide. Miniaturized ultrasonic systems require ultrasonic transducers integrated with complementary metal-oxide-semiconductor circuits. Hence, piezoelectric MUTs (pMUTs) and capacitive MUTs (cMUTs) have been developed as the most favorable solutions. This paper reviews the basic equations to understand the characteristics of thin-film-based piezoelectric devices and presents recent research on pMUTs, including current approaches and limitations. Methods to improve the coupling coefficient of pMUTs are also investigated, such as device structure, materials, and fabrication techniques. The device structure improvements include multielectrode pMUTs, partially clamped boundary conditions, and 3D pMUTs (curved and domed types), where the latter can provide an electromechanical coupling coefficient of up to 45%. The piezoelectric coefficient (e 31) can be increased by controlling the crystal texture (seed layer of γ-Al2O3), using single-crystal (PMN-PT) materials, or control of residual stresses (using SiO2 layer). Arrays of pMUTs can be implemented for various applications including intravascular ultrasound, fingerprint sensors, rangefinders in air, and wireless power supply systems. pMUTs are expected to be an ideal solution for applications such as mobile biometric security (fingerprint sensors) and rangefinders due to their superior power efficiency and compact size.

  16. Capacitive micromachined ultrasonic transducers (CMUTs) for photoacoustic imaging

    Science.gov (United States)

    Vaithilingam, Srikant; Wygant, Ira O.; Kuo, Paulina S.; Zhuang, Xuefeng; Oralkan, Ömer; Olcott, Peter D.; Khuri-Yakub, Butrus T.

    2006-02-01

    In photoacoustic (optoacoustic) medical imaging, short laser pulses irradiate absorbing structures found in tissue, such as blood vessels, causing brief thermal expansions that in turn generate ultrasound waves. These ultrasound waves which correspond to the optical absorption distribution were imaged using a two dimensional array of capacitive micromachined ultrasonic transducers (CMUTs). Advantages of CMUT technology for photoacoustic imaging include the ease of integration with electronics, ability to fabricate large two dimensional arrays, arrays with arbitrary geometries, wide-bandwidth arrays and high-frequency arrays. In this study, a phantom consisting of three 0.86-mm inner diameter polyethylene tubes inside a tissue mimicking material was imaged using a 16 x 16 element CMUT array. The center tube was filled with India-ink to provide optical contrast. Traditional pulse-echo data as well as photoacoustic image data were taken. 2D cross-sectional slices and 3D volume rendered images are shown. Simple array tiling was attempted, whereby a 48 x 48 element array was simulated, to illustrate the advantages of larger arrays. Finally, the sensitivity of the photoacoustics setup to the concentration of ink in the tube was also explored. For the sensitivity experiment a different phantom consisting of only one 1.14-mm inner diameter polyethylene tube inside a tissue mimicking material was used. The concentration of the ink inside the tube was varied and images were taken.

  17. Capacitive micromachined ultrasound transducer (cMUT) for immunosensor design.

    Science.gov (United States)

    Ramanaviciene, Almira; Virzonis, Darius; Vanagas, Gailius; Ramanavicius, Arūnas

    2010-07-01

    An affinity sensor based on a capacitive micromachined ultrasound transducer (cMUT) is reported by this Communication. The cMUT micromembrane arrays modified with adsorbed bovine leukemia virus protein gp51 were applied as a biological recognition part. The cMUT-based sensor is shown to be sensitive to the antibodies against bovine leukemia virus protein gp51 (anti-gp51). Two different concentrations of anti-gp51-containing samples and one blank sample without anti-gp51 were tested. The sensitivity of cMUT-based immunosensor is comparable with the sensitivity of a quartz microbalance-based immunosensor. The cMUT array provides a multi-channel system for the measurement of analytical signal. Moreover, two different characteristics--the resonance frequency shift (Deltaf) and the shift of the real part of the electromechanical impedance (DeltaRe)--could have been evaluated simultaneously. Both analytical signals are informative and can be applied for the estimation of immune complex formation. We found the performance of such a system being potentially superior over some other immunosensing techniques. It is more rapid than electrochemical techniques and provides two different informative parameters.

  18. Radiation impedance of collapsed capacitive micromachined ultrasonic transducers.

    Science.gov (United States)

    Ozgurluk, Alper; Atalar, Abdullah; Köymen, Hayrettin; Olçum, Selim

    2012-06-01

    The radiation impedance of a capacitive micromachined ultrasonic transducer (CMUT) array is a critical parameter to achieve high performance. In this paper, we present a calculation of the radiation impedance of collapsed, clamped, circular CMUTs both analytically and using finite element method (FEM) simulations. First, we model the radiation impedance of a single collapsed CMUT cell analytically by expressing its velocity profile as a linear combination of special functions for which the generated pressures are known. For an array of collapsed CMUT cells, the mutual impedance between the cells is also taken into account. The radiation impedances for arrays of 7, 19, 37, and 61 circular collapsed CMUT cells for different contact radii are calculated both analytically and by FEM simulations. The radiation resistance of an array reaches a plateau and maintains this level for a wide frequency range. The variation of radiation reactance with respect to frequency indicates an inductance-like behavior in the same frequency range. We find that the peak radiation resistance value is reached at higher kd values in the collapsed case as compared with the uncollapsed case, where k is the wavenumber and d is the center-to-center distance between two neighboring CMUT cells.

  19. Diamond-based capacitive micromachined ultrasonic transducers in immersion.

    Science.gov (United States)

    Cetin, Ahmet M; Bayram, Baris

    2013-02-01

    Diamond is a superior membrane material for capacitive micromachined ultrasonic transducers (CMUTs). By using ultrananocrystalline diamond (UNCD) membrane and plasma-activated wafer bonding technology, a single diamond-based circular CMUT is demonstrated and operated in immersion for the first time. The diamond-based CMUT, biased at 100 V, is excited with a 10-cycle burst of 36 V(p-p) sine signal at 3.5 MHz. Pressure generated on a 2-D plane coincident with the normal of the CMUT is measured using a broadband hydrophone. Peak-to-peak hydrophone voltage measurements along the scan area clearly indicate the main lobe and the side lobes, as theoretically predicted by our directivity function calculations. The peak-to-peak hydrophone voltage on the axial direction of the CMUT is found to be in agreement with our theoretical calculations in the Fraunhofer region (-45 mm CMUT is measured for a dc bias of 100 V, and ac excitation with 30-cycle bursts of 9, 36, and 54 V(p-p) sine signal. A peak response at 5.6 MHz is measured for all ac amplitudes. Overall, diamond is shown to be an applicable membrane for CMUT devices and applications.

  20. Receive-Noise Analysis of Capacitive Micromachined Ultrasonic Transducers.

    Science.gov (United States)

    Bozkurt, Ayhan; Yaralioglu, G Goksenin

    2016-11-01

    This paper presents an analysis of thermal (Johnson) noise received from the radiation medium by otherwise noiseless capacitive micromachined ultrasonic transducer (CMUT) membranes operating in their fundamental resonance mode. Determination of thermal noise received by multiple numbers of transducers or a transducer array requires the assessment of cross-coupling through the radiation medium, as well as the self-radiation impedance of the individual transducer. We show that the total thermal noise received by the cells of a CMUT has insignificant correlation, and is independent of the radiation impedance, but is only determined by the mass of each membrane and the electromechanical transformer ratio. The proof is based on the analytical derivations for a simple transducer with two cells, and extended to transducers with numerous cells using circuit simulators. We used a first-order model, which incorporates the fundamental resonance of the CMUT. Noise power is calculated by integrating over the entire spectrum; hence, the presented figures are an upper bound for the noise. The presented analyses are valid for a transimpedance amplifier in the receive path. We use the analysis results to calculate the minimum detectable pressure of a CMUT. We also provide an analysis based on the experimental data to show that output noise power is limited by and comparable to the theoretical upper limit.

  1. Towards a Casimir Force Measurement between Micromachined Parallel Plate Structures

    Directory of Open Access Journals (Sweden)

    Remco J. Wiegerink

    2012-11-01

    Full Text Available Ever since its prediction, experimental investigation of the Casimir force has been of great scientific interest. Many research groups have successfully attempted quantifying the force with different device geometries; however, measurement of the Casimir force between parallel plates with sub-micron separation distance is still a challenging task, since it becomes extremely difficult to maintain sufficient parallelism between the plates. The Casimir force can significantly influence the operation of micro devices and to realize reliable and reproducible devices it is necessary to understand and experimentally verify the influence of the Casimir force at sub-micron scale. In this paper, we present the design principle, fabrication and characterization of micromachined parallel plate structures that could allow the measurement of the Casimir force with tunable separation distance in the range of 100 to 1000 nm. Initially, a gold coated parallel plate structure is explored to measure the Casimir force, but also other material combinations could be investigated. Using gold-silicon eutectic bonding, a reliable approach to bond chips with integrated suspended plates together with a well-defined separation distance in the order of 1–2 μm is developed.

  2. Review of piezoelectric micromachined ultrasonic transducers and their applications

    International Nuclear Information System (INIS)

    Jung, Joontaek; Lee, Wonjun; Kang, Woojin; Shin, Eunjung; Choi, Hongsoo; Ryu, Jungho

    2017-01-01

    In recent decades, micromachined ultrasonic transducers (MUTs) have been investigated as an alternative to conventional piezocomposite ultrasonic transducers, primarily due to the advantages that microelectromechanical systems provide. Miniaturized ultrasonic systems require ultrasonic transducers integrated with complementary metal-oxide-semiconductor circuits. Hence, piezoelectric MUTs (pMUTs) and capacitive MUTs (cMUTs) have been developed as the most favorable solutions. This paper reviews the basic equations to understand the characteristics of thin-film-based piezoelectric devices and presents recent research on pMUTs, including current approaches and limitations. Methods to improve the coupling coefficient of pMUTs are also investigated, such as device structure, materials, and fabrication techniques. The device structure improvements include multielectrode pMUTs, partially clamped boundary conditions, and 3D pMUTs (curved and domed types), where the latter can provide an electromechanical coupling coefficient of up to 45%. The piezoelectric coefficient ( e 31 ) can be increased by controlling the crystal texture (seed layer of γ -Al 2 O 3 ), using single-crystal (PMN-PT) materials, or control of residual stresses (using SiO 2 layer). Arrays of pMUTs can be implemented for various applications including intravascular ultrasound, fingerprint sensors, rangefinders in air, and wireless power supply systems. pMUTs are expected to be an ideal solution for applications such as mobile biometric security (fingerprint sensors) and rangefinders due to their superior power efficiency and compact size. (topical review)

  3. Design and Simulation of a New Decoupled Micromachined Gyroscope

    Energy Technology Data Exchange (ETDEWEB)

    Sharaf, Abdelhameed [NCRRT, EAEA, 3 Ahmed Elzomer Street, Nasr City, Cairo (Egypt); STRC, AUC, 113 Kasr El Eini Street, 11215, Cairo (Egypt); Sedky, Sherif [STRC, AUC, 113 Kasr El Eini Street, 11215, Cairo (Egypt); Physics Department, AUC, 113 Kasr El Eini Street, 11215, Cairo (Egypt); Habib, S E-D [Electronics and Communication Department, Faculty of Engineering, Cairo University, 12613, Giza (Egypt)

    2006-04-01

    This paper reports on a new decoupled micromachined gyroscope. The proposed sensor is a dual mass type, electrostatically driven to primary mode oscillation and senses, capacitively, the output signal. Full decoupling between drive and sense modes minimizes the mechanical crosstalk. Three different designs are introduced in this work. Drive and sense amplitudes, mechanical and electrical sensitivities, quality factors and approximate bandwidths are extracted analytically and the results are confirmed using finite element analysis. The first design shows drive and sense modes resonance frequencies of 4077 Hz and 4081 Hz respectively; with a frequency mismatch lower than 0.1%. The drive and sense capacitance are 0.213 pF and 0.142 pF respectively. The mechanical and electrical sensitivities are 0.011 {mu}m/ ({sup 0}/s) and 2.75 mV/ ({sup 0}/s) respectively. The third design shows significantly improved mechanical and electrical sensitivities of 0.027 {mu}m/ ({sup 0}/s) and 6.85 mV/ ({sup 0}/s) respectively.

  4. Femtosecond laser 3D micromachining for microfluidic and optofluidic applications

    CERN Document Server

    Sugioka, Koji

    2013-01-01

    Femtosecond lasers opened up new avenue in materials processing due to its unique features of ultrashort pulse width and extremely high peak intensity. One of the most important features of femtosecond laser processing is that strong absorption can be induced even by materials which are transparent to the femtosecond laser beam due to nonlinear multiphoton absorption. The multiphoton absorption allows us to perform not only surface but also three-dimensionally internal microfabrication of transparent materials such as glass. This capability makes it possible to directly fabricate three-dimensi

  5. 30 CFR 905.764 - Process for designating areas unsuitable for surface coal mining operations.

    Science.gov (United States)

    2010-07-01

    ... surface coal mining operations. 905.764 Section 905.764 Mineral Resources OFFICE OF SURFACE MINING... WITHIN EACH STATE CALIFORNIA § 905.764 Process for designating areas unsuitable for surface coal mining... coal mining operations beginning one year after the effective date of this program. ...

  6. 30 CFR 921.764 - Process for designating areas unsuitable for surface coal mining operations.

    Science.gov (United States)

    2010-07-01

    ... surface coal mining operations. 921.764 Section 921.764 Mineral Resources OFFICE OF SURFACE MINING RECLAMATION AND ENFORCEMENT, DEPARTMENT OF THE INTERIOR PROGRAMS FOR THE CONDUCT OF SURFACE MINING OPERATIONS... Coal Mining Operations, pertaining to petitioning, initial processing, hearing requirements, decisions...

  7. 30 CFR 947.764 - Process for designating areas unsuitable for surface coal mining operations.

    Science.gov (United States)

    2010-07-01

    ... surface coal mining operations. 947.764 Section 947.764 Mineral Resources OFFICE OF SURFACE MINING... WITHIN EACH STATE WASHINGTON § 947.764 Process for designating areas unsuitable for surface coal mining... coal mining and reclamation operations. (b) The Secretary shall notify the Washington Department of...

  8. 30 CFR 933.764 - Process for designating areas unsuitable for surface coal mining operations.

    Science.gov (United States)

    2010-07-01

    ... surface coal mining operations. 933.764 Section 933.764 Mineral Resources OFFICE OF SURFACE MINING... Coal Mining Operations, pertaining to petitioning, initial processing, hearing requirements, decisions... surface coal mining and reclamation operations beginning one year after the effective date of this program. ...

  9. 30 CFR 903.764 - Process for designating areas unsuitable for surface coal mining operations.

    Science.gov (United States)

    2010-07-01

    ... surface coal mining operations. 903.764 Section 903.764 Mineral Resources OFFICE OF SURFACE MINING... WITHIN EACH STATE ARIZONA § 903.764 Process for designating areas unsuitable for surface coal mining... coal mining operations beginning June 24, 1996, one year after the effective date of this program. ...

  10. Gradient nanostructured surface of a Cu plate processed by incremental frictional sliding

    DEFF Research Database (Denmark)

    Hong, Chuanshi; Huang, Xiaoxu; Hansen, Niels

    2015-01-01

    The flat surface of a Cu plate was processed by incremental frictional sliding at liquid nitrogen temperature. The surface treatment results in a hardened gradient surface layer as thick as 1 mm in the Cu plate, which contains a nanostructured layer on the top with a boundary spacing of the order...

  11. Coronal Structures as Tracers of Sub-Surface Processes

    Indian Academy of Sciences (India)

    tribpo

    The corona - a tenuous portion of the solar upper atmosphere - was observed as early as 1063 ... is still open. Considering the possible processes that can affect the appearance of coronal structures, one can divide them into two categories: ones that take place above the ... The hemispheric helicity rule in the solar corona.

  12. Nano surface generation of grinding process using carbon nano tubes

    Indian Academy of Sciences (India)

    cations of carbon nanotubes, with the aim of drawing attention to useful available information and to enhancing ... of AISI D2 tool steel machined by the electrical discharge machining (EDM) process were analysed by .... dimensions, the force loading mechanism, the probe-sample-position control system allow. Figure 3.

  13. A Micromachined Pressure Sensor with Integrated Resonator Operating at Atmospheric Pressure

    Directory of Open Access Journals (Sweden)

    Sen Ren

    2013-12-01

    Full Text Available A novel resonant pressure sensor with an improved micromechanical double-ended tuning fork resonator packaged in dry air at atmospheric pressure is presented. The resonator is electrostatically driven and capacitively detected, and the sensor is designed to realize a low cost resonant pressure sensor with medium accuracy. Various damping mechanisms in a resonator that is vibrating at atmospheric pressure are analyzed in detail, and a formula is developed to predict the overall quality factor. A trade-off has been reached between the quality factor, stress sensitivity and drive capability of the resonator. Furthermore, differential sense elements and the method of electromechanical amplitude modulation are used for capacitive detection to obtain a large signal-to-noise ratio. The prototype sensor chip is successfully fabricated using a micromachining process based on a commercially available silicon-on-insulator wafer and is hermetically encapsulated in a custom 16-pin Kovar package. Preliminary measurements show that the fundamental frequency of the resonant pressure sensor is approximately 34.55 kHz with a pressure sensitivity of 20.77 Hz/kPa. Over the full scale pressure range of 100–400 kPa and the whole temperature range of −20–60 °C, high quality factors from 1,146 to 1,772 are obtained. The characterization of the prototype sensor reveals the feasibility of a resonant pressure sensor packaged at atmospheric pressure.

  14. Sapphire capillaries for laser-driven wakefield acceleration in plasma. Fs-laser micromachining and characterization

    Energy Technology Data Exchange (ETDEWEB)

    Schwinkendorf, Jan-Patrick

    2012-08-15

    Plasma wakefields are a promising approach for the acceleration of electrons with ultrahigh (10 to 100 GV/m) electric fields. Nowadays, high-intensity laser pulses are routinely utilized to excite these large-amplitude plasma waves. However, several detrimental effects such as laser diffraction, electron-wake dephasing and laser depletion may terminate the acceleration process. Two of these phenomena can be mitigated or avoided by the application of capillary waveguides, e.g. fabricated out of sapphire for longevity. Capillaries may compensate for laser diffraction like a fiber and allow for the creation of tapered gas-density profiles working against the dephasing between the accelerating wave and the particles. Additionally, they offer the possibility of controlled particle injection. This thesis is reporting on the set up of a laser for fs-micromachining of capillaries of almost arbitrary shapes and a test stand for density-profile characterization. These devices will permit the creation of tailored gas-density profiles for controlled electron injection and acceleration inside plasma.

  15. Reverberation Reduction in Capacitive Micromachined Ultrasonic Transducers (CMUTs) by Front-face Reflectivity Minimization

    Science.gov (United States)

    Savoia, Alessandro Stuart; La Mura, Monica; Mauti, Barbara; Lamberti, Nicola; Caliano, Giosuè

    Front-face acoustic reflectivity of ultrasonic imaging transducers, due to acoustic impedance mismatch with the propagation medium, may cause reverberation phenomena during wideband pulse-echo operation. Front-face reflectivity may be reduced by promoting the transmission of the echoes, received from the medium, to the transducer backing, and by maximizing the mechanical-to-electrical energy conversion and dissipation by tuning the electrical load impedance connected to the transducer. In Capacitive Micromachined Ultrasonic Transducers (CMUTs), the energy transfer from the medium to the backing is very low due to the large impedance mismatch between the medium and the transducer substrate, typically made of silicon. Reverse Fabrication Process (RFP) makes it possible providing CMUTs with custom substrate materials, thus eliminating the original silicon microfabrication support. In this paper, we propose two methods for the front-face reflectivity reduction in RFP-CMUTs: the first one is based on the use of low-impedance, highly attenuating backing materials, and the second one is based on the maximization of the mechanoelectrical energy conversion and dissipation. We analyze the methods by finite element simulations and experimentally validate the obtained results by fabricating and characterizing single-element RFP-CMUTs provided with different backing materials and electrical loads.

  16. Capacitive micromachined ultrasonic transducer for ultra-low pressure measurement: Theoretical study

    Science.gov (United States)

    Li, Zhikang; Zhao, Libo; Jiang, Zhuangde; Akhbari, Sina; Ding, Jianjun; Zhao, Yihe; Zhao, Yulong; Lin, Liwei

    2015-12-01

    Ultra-low pressure measurement is necessary in many areas, such as high-vacuum environment monitoring, process control and biomedical applications. This paper presents a novel approach for ultra-low pressure measurement where capacitive micromachined ultrasonic transducers (CMUTs) are used as the sensing elements. The working principle is based on the resonant frequency shift of the membrane under the applied pressure. The membranes of the biased CMUTs can produce a larger resonant frequency shift than the diaphragms with no DC bias in the state-of-the-art resonant pressure sensors, which contributes to pressure sensitivity improvement. The theoretical analysis and finite element method (FEM) simulation were employed to study the relationship between the resonant frequency and the pressure. The results demonstrated excellent capability of the CMUTs for ultra-low pressure measurement. It is shown that the resonant frequency of the CMUT varies linearly with the applied pressure. A sensitivity of more than 6.33 ppm/Pa (68 kHz/kPa) was obtained within a pressure range of 0 to 100 Pa when the CMUTs were biased at a DC voltage of 90% of the collapse voltage. It was also demonstrated that the pressure sensitivity can be adjusted by the DC bias voltage. In addition, the effects of air damping and ambient temperature on the resonant frequency were also studied. The effect of air damping is negligible for the pressures below 1000 Pa. To eliminate the temperature effect on the resonant frequency, a temperature compensating method was proposed.

  17. Micromachining and dicing of sapphire, gallium nitride and micro LED devices with UV copper vapour laser

    International Nuclear Information System (INIS)

    Gu, E.; Jeon, C.W.; Choi, H.W.; Rice, G.; Dawson, M.D.; Illy, E.K.; Knowles, M.R.H.

    2004-01-01

    Gallium nitride (GaN) and sapphire are important materials for fabricating photonic devices such as high brightness light emitting diodes (LEDs). These materials are strongly resistant to wet chemical etching and also, low etch rates restrict the use of dry etching. Thus, to develop alternative high resolution processing and machining techniques for these materials is important in fabricating novel photonic devices. In this work, a repetitively pulsed UV copper vapour laser (255 nm) has been used to machine and dice sapphire, GaN and micro LED devices. Machining parameters were optimised so as to achieve controllable machining and high resolution. For sapphire, well-defined grooves 30 μm wide and 430 μm deep were machined. For GaN, precision features such as holes on a tens of micron length scale have been fabricated. By using this technique, compact micro LED chips with a die spacing 100 and a 430 μm thick sapphire substrate have been successfully diced. Measurements show that the performances of LED devices are not influenced by the UV laser machining. Our results demonstrate that the pulsed UV copper vapour laser is a powerful tool for micromachining and dicing of photonic materials and devices

  18. Sapphire capillaries for laser-driven wakefield acceleration in plasma. Fs-laser micromachining and characterization

    International Nuclear Information System (INIS)

    Schwinkendorf, Jan-Patrick

    2012-05-01

    Plasma wakefields are a promising approach for the acceleration of electrons with ultrahigh (10 to 100 GV/m) electric fields. Nowadays, high-intensity laser pulses are routinely utilized to excite these large-amplitude plasma waves. However, several detrimental effects such as laser diffraction, electron-wake dephasing and laser depletion may terminate the acceleration process. Two of these phenomena can be mitigated or avoided by the application of capillary waveguides, e.g. fabricated out of sapphire for longevity. Capillaries may compensate for laser diffraction like a fiber and allow for the creation of tapered gas-density profiles working against the dephasing between the accelerating wave and the particles. Additionally, they offer the possibility of controlled particle injection. This thesis is reporting on the set up of a laser for fs-micromachining of capillaries of almost arbitrary shapes and a test stand for density-profile characterization. These devices will permit the creation of tailored gas-density profiles for controlled electron injection and acceleration inside plasma.

  19. Surface conductivity dependent dynamic behaviour of an ultrafine atmospheric pressure plasma jet for microscale surface processing

    Energy Technology Data Exchange (ETDEWEB)

    Abuzairi, Tomy [Graduate School of Science and Technology, Shizuoka University, Hamamatsu 432-8561 (Japan); Department of Electrical Engineering, Faculty of Engineering, Universitas Indonesia, Depok 16424 (Indonesia); Okada, Mitsuru [Department of Engineering, Shizuoka University, Hamamatsu 432-8561 (Japan); Bhattacharjee, Sudeep [Department of Physics, Indian Institute of Technology, Kanpur 208016 (India); Nagatsu, Masaaki, E-mail: nagatsu.masaaki@shizuoka.ac.jp [Graduate School of Science and Technology, Shizuoka University, Hamamatsu 432-8561 (Japan); Department of Engineering, Shizuoka University, Hamamatsu 432-8561 (Japan); Research Institute of Electronics, Shizuoka University, Hamamatsu 432-8561 (Japan)

    2016-12-30

    Highlights: • Spatio-temporal behaviors of capillary APPJs are studied for various substrates. • Plasma irradiation area depended on the substrate conductivity and permittivity. • Surface irradiation area was significantly broadened in polymer-like substrate. • Effect of applying a substrate bias on the APPJ irradiation area was investigated. - Abstract: An experimental study on the dynamic behaviour of microcapillary atmospheric pressure plasma jets (APPJs) with 5 μm tip size for surfaces of different conductivity is reported. Electrical and spatio-temporal characteristics of the APPJs are monitored using high voltage probe, current monitor and high speed intensified charge couple device camera. From these experimental results, we presented a simple model to understand the electrical discharge characteristics of the capillary APPJs with double electrodes, and estimated the velocity of the ionization fronts in the jet and the electron density to be 3.5–4.2 km/s and 2–7 × 10{sup 17} m{sup −3}. By analyzing the dynamics of the microcapillary APPJs for different substrate materials, it was found that the surface irradiation area strongly depended on the substrate conductivity and permittivity, especially in the case of polymer-like substrate, surface irradiation area was significantly broadened probably due to the repelling behaviour of the plasma jets from the accumulated electrical charges on the polymer surface. The effect of applying a substrate bias in the range from −900 V to +900 V on the plasma irradiation onto the substrates was also investigated. From the knowledge of the present results, it is helpful for choosing the substrate materials for microscale surface modification.

  20. Tribological investigations of the applicability of surface functionalization for dry extrusion processes

    Science.gov (United States)

    Teller, Marco; Prünte, Stephan; Ross, Ingo; Temmler, André; Schneider, Jochen M.; Hirt, Gerhard

    2017-10-01

    Cold extrusion processes are characterized by large relative contact stresses combined with a severe surface enlargement of the workpiece. Under these process conditions a high risk for galling of workpiece material to the tool steel occurs especially in processing of aluminum and aluminum alloys. In order to reduce adhesive wear lubricants for separation of workpiece and tool surfaces are used. As a consequence additional process steps (e.g. preparation and cleaning of workpieces) are necessary. Thus, the realization of a dry forming process is aspired from an environmental and economic perspective. In this paper a surface functionalization with self-assembled-monolayers (SAM) of the tool steels AISI D2 (DIN 1.2379) and AISI H11 (DIN 1.2343) is evaluated by a process-oriented tribological test. The tribological experiment is able to resemble and scale the process conditions of cold extrusion related to relative contact stress and surface enlargement for the forming of pure aluminum (Al99.5). The effect of reduced relative contact stress, surface enlargement and relative velocity on adhesive wear and tool lifetime is evaluated. Similar process conditions are achievable by different die designs with decreased extrusion ratios and adjusted die angles. The effect of surface functionalization critically depends on the substrate material. The different microstructure and the resulting differences in surface chemistry of the two tested tool steels appear to affect the performance of the tool surface functionalization with SAM.

  1. Recycling and surface erosion processes in contemporary tokamaks

    International Nuclear Information System (INIS)

    McCracken, G.M.

    1979-03-01

    A number of global models have recently had considerable success in describing recycling. These are briefly reviewed. It is shown that large gas concentrations can build up in the walls and that these concentrations are seriously affected by erosion and deposition processes and by deliberate gettering with titanium. Finally, the measurement of the concentration of hydrogen in probes is discussed as a means of measuring plasma edge characteristics

  2. Influence of the surface layer characteristics on the regularities of the cutting process

    Directory of Open Access Journals (Sweden)

    Krainev Dmitriy V.

    2017-01-01

    Full Text Available The article considers the influence of the surface layer characteristics on the regularities of the cutting process and the formation of the quality of the surface machined. This effect has been confirmed by the study results of the combined cutting method with advanced plastic deformation (APD. The work estimates the impact of the change in the surface layer properties on the forces and temperature of cutting, stability of the chip formation and quality parameters of the surface machined.

  3. Effect of different machining processes on the tool surface integrity and fatigue life

    Energy Technology Data Exchange (ETDEWEB)

    Cao, Chuan Liang [College of Mechanical and Electrical Engineering, Nanchang University, Nanchang (China); Zhang, Xianglin [School of Materials Science and Engineering, Huazhong University of Science and Technology, Wuhan (China)

    2016-08-15

    Ultra-precision grinding, wire-cut electro discharge machining and lapping are often used to machine the tools in fine blanking industry. And the surface integrity from these machining processes causes great concerns in the research field. To study the effect of processing surface integrity on the fine blanking tool life, the surface integrity of different tool materials under different processing conditions and its influence on fatigue life were thoroughly analyzed in the present study. The result shows that the surface integrity of different materials was quite different on the same processing condition. For the same tool material, the surface integrity on varying processing conditions was quite different too and deeply influenced the fatigue life.

  4. Microscopic investigation of RF surfaces of 3 GHz niobium accelerator cavities following RF processing

    International Nuclear Information System (INIS)

    Graber, J.; Barnes, P.; Flynn, T.; Kirchgessner, J.; Knobloch, J.; Moffat, D.; Muller, H.; Padamsee, H.; Sears, J.

    1993-01-01

    RF processing of Superconducting accelerating cavities is achieved through a change in the electron field emission (FE) characteristics of the RF surface. The authors have examined the RF surfaces of several single-cell 3 GHz cavities, following RF processing, in a Scanning Electron Microscope (SEM). The RF processing sessions included both High Peak Power (P ≤ 50 kW) pulsed processing, and low power (≤ 20 W) continuous wave processing. The experimental apparatus also included a thermometer array on the cavity outer wall, allowing temperature maps to characterize the emission before and after RF processing gains. Multiple sites have been located in cavities which showed improvements in cavity behavior due to RF processing. Several SEM-located sites can be correlated with changes in thermometer signals, indicating a direct relationship between the surface site and emission reduction due to RF processing. Information gained from the SEM investigations and thermometry are used to enhance the theoretical model of RF processing

  5. Micromachined Millimeter- and Submillimeter-Wave SIS Heterodyne Receivers for Remote Sensing

    Science.gov (United States)

    Hu, Qing

    1998-01-01

    A heterodyne mixer with a micromachined horn antenna and a superconductor -insulator-superconductor (SIS) tunnel junction as mixing element is tested in the W-band (75-115 GHz) frequency range. Micromachined integrated horn antennas consist of a dipole antenna suspended on a thin Si3N4 dielectric membrane inside a pyramidal cavity etched in silicon. The mixer performance is optimized by using a backing plane behind the dipole antenna to tune out the capacitance of the tunnel junction. The lowest receiver noise temperature of 30+/-3 K without any correction) is measured at 106 GHz with a 3-dB bandwidth of 8 GHz. This sensitivity is comparable to the state-of-the-art waveguide and quasi-optical SIS receivers, showing the potential use of micromachined horn antennas in imaging arrays.

  6. A Low-noise Micromachined Millimeter-Wave Heterodyne Mixer using Nb Superconducting Tunnel Junctions

    Science.gov (United States)

    DeLange, Gert; Jacobson, Brian R.; Hu, Qing

    1996-01-01

    A heterodyne mixer with a micromachined horn antenna and a superconductor-insulator-superconductor (SIS) tunnel junction as mixing element is tested in the W-band (75-115 GHz) frequency range. Micromachined integrated horn antennas consist of a dipole antenna suspended on a thin Si3N4 dielectric membrane inside a pyramidal cavity etched in silicon. The mixer performance is optimized by using a backing plane behind the dipole antenna to tune out the capacitance of the tunnel junction. The lowest receiver noise temperature of 30 +/- 3 K (without any correction) is measured at 106 GHz with a 3-dB bandwidth of 8 GHz. This sensitivity is comparable to the state-of-the-art waveguide and quasi-optical SIS receivers, showing the potential use of micromachined horn antennas in imaging arrays.

  7. Air/surface exchange processes of mercury and their linkage to atmospheric pools

    International Nuclear Information System (INIS)

    Bahlmann, Enno; Ebinghaus, Ralf

    2001-01-01

    The atmospheric mercury cycle is strongly linked to the terrestrial, aquatic and biologic cycle of mercury via air/surface exchange processes. In order to quantify mercury fluxes from and to the atmosphere to predict local and regional source contributions the methods for flux measurements as well as the physicochemical factors controlling air/surface exchange processes must be assessed. We will describe methods for the determination of mercury and mercury species in ambient air which are basic for investigation of air/surface exchange processes. Further on we will describe approaches for studying the physicochemical factors controlling this processes by using a new laboratory flux measurement system. (author)

  8. Improvement of Surface Properties of CP-Titanium by Thermo-Chemical Treatment (TCT) Process

    International Nuclear Information System (INIS)

    Jeong, Hyeon-Gyeong; Hur, Bo-Young; Lee, Dong-Geun; Lee, Yong-Tai; Yaskiv, O.

    2011-01-01

    The thermo-chemical treatment (TCT) process was applied to achieve surface hardening of CP titanium. The following three different surface modification conditions were tested so that the best surface hardening process could be selected:(a) PVD, (b) TCT+PVD, and (c) TCT+Aging+PVD. These specimens were tested and analyzed in terms of surface roughness, wear, friction coefficient, and the gradient of hardening from the surface of the matrix. The three test conditions were all beneficial to improve the surface hardness of CP titanium. Moreover, the TCT treated specimens, that is, (b) and (c), showed significantly improved surface hardness and low friction coefficients through the thickness up to 100um. This is due to the functionally gradient hardened surface improvement by the diffused interstitial elements. The hardened surface also showed improvement in bonding between the PVD and TCT surface, and this leads to improvement in wear resistance. However, TCT after aging treatment did not show much improvement in surface properties compared to TCT only. For the best surface hardening on CP titanium, TCT+PVD has advantages in surface durability and economics.

  9. Optical monitoring of surface processes relevant to thin film growth by chemical vapour deposition Oxidation; Surface degradation

    CERN Document Server

    Simcock, M N

    2002-01-01

    This thesis reports on the investigation of the use of reflectance anisotropy spectroscopy (RAS) as an in-situ monitor for the preparation and oxidation of GaAs(100) c(4x4) surfaces using a CVD 2000 MOCVD reactor. These surfaces were oxidised using air. It was found that it was possible to follow surface degradation using RA transients at 2.6eV and 4eV. From this data it was possible to speculate on the nature of the surface oxidation process. A study was performed into the rate of surface degradation under different concentrations of air, it was found that the relation between the air concentration and the surface degradation was complicated but that the behaviour of the first third of the degradation approximated a first order behaviour. An estimation of the activation energy of the process was then made, and an assessment of the potential use of the glove-box for STM studies which is an integral part of the MOCVD equipment was also made. Following this, a description is given of the construction of an inte...

  10. Experimental Analysis of Bisbenzocyclobutene Bonded Capacitive Micromachined Ultrasonic Transducers.

    Science.gov (United States)

    Manwar, Rayyan; Chowdhury, Sazzadur

    2016-06-24

    Experimental measurement results of a 1.75 mm × 1.75 mm footprint area Capacitive Micromachined Ultrasonic Transducer (CMUT) planar array fabricated using a bisbenzocyclobutene (BCB)-based adhesive wafer bonding technique has been presented. The array consists of 40 × 40 square diaphragm CMUT cells with a cavity thickness of 900 nm and supported by 10 µm wide dielectric spacers patterned on a thin layer of BCB. A 150 µm wide one µm thick gold strip has been used as the contact pad for gold wire bonding. The measured resonant frequency of 19.3 MHz using a Polytec™ laser Doppler vibrometer (Polytec™ MSA-500) is in excellent agreement with the 3-D FEA simulation result using IntelliSuite™. An Agilent ENA5061B vector network analyzer (VNA) has been used for impedance measurement and the resonance and anti-resonance values from the imaginary impedance curve were used to determine the electromechanical coupling co-efficient. The measured coupling coefficient of 0.294 at 20 V DC bias exhibits 40% higher transduction efficiency as compared to a measured value published elsewhere for a silicon nitride based CMUT. A white light interferometry method was used to measure the diaphragm deflection profiles at different DC bias. The diaphragm center velocity was measured for different sub-resonant frequencies using a Polytec™ laser Doppler vibrometer that confirms vibration of the diaphragm at different excitation frequencies and bias voltages. Transmit and receive operations of CMUT cells were characterized using a pitch-catch method and a -6 dB fractional bandwidth of 23% was extracted from the received signal in frequency domain. From the measurement, it appears that BCB-based CMUTs offer superior transduction efficiency as compared to silicon nitride or silicon dioxide insulator-based CMUTs, and provide a very uniform deflection profile thus making them a suitable candidate to fabricate highly energy efficient CMUTs.

  11. Chemical vapor detection using a capacitive micromachined ultrasonic transducer.

    Science.gov (United States)

    Lee, Hyunjoo J; Park, Kwan Kyu; Kupnik, Mario; Oralkan, O; Khuri-Yakub, Butrus T

    2011-12-15

    Distributed sensing of gas-phase chemicals using highly sensitive and inexpensive sensors is of great interest for many defense and consumer applications. In this paper we present ppb-level detection of dimethyl methylphosphonate (DMMP), a common simulant for sarin gas, with a ppt-level resolution using an improved capacitive micromachined ultrasonic transducer (CMUT) as a resonant chemical sensor. The improved CMUT operates at a higher resonant frequency of 47.7 MHz and offers an improved mass sensitivity of 48.8 zg/Hz/μm(2) by a factor of 2.7 compared to the previous CMUT sensors developed. A low-noise oscillator using the CMUT resonant sensor as the frequency-selective device was developed for real-time sensing, which exhibits an Allan deviation of 1.65 Hz (3σ) in the presence of a gas flow; this translates into a mass resolution of 80.5 zg/μm(2). The CMUT resonant sensor is functionalized with a 50-nm thick DKAP polymer developed at Sandia National Laboratory for dimethyl methylphosphonate (DMMP) detection. To demonstrate ppb-level detection of the improved chemical sensor system, the sensor performance was tested at a certified lab (MIT Lincoln Laboratory), which is equipped with an experimental chemical setup that reliably and accurately delivers a wide range of low concentrations down to 10 ppb. We report a high volume sensitivity of 34.5 ± 0.79 pptv/Hz to DMMP and a good selectivity of the polymer to DMMP with respect to dodecane and 1-octanol.

  12. The theory of development of surface morphology by sputter erosion processes

    International Nuclear Information System (INIS)

    Carter, G.; Nobes, M.J.

    1984-01-01

    When a surface is bombarded by an energetic ion flux a rich variety of surface structures are observed to develop at the atomic, microscopic and macroscopic scales. Such structures include elevated, with respect to the surrounding surface, features such as mesas or plateaux, ridges, cones and pyramids and depressed features such as etch pits and cavities. These elementary features may be isolated or in profusion and frequently repetitive patterns of coordinated pyramidal structures, etch pits, surface ledges or facets and ripple or wave-like structures occur. The majority of the features arise rather directly from the erosion action of the sputtering process, particularly from differential erosion processes at different surface localities. The authors outline a general approach to sputter erosion induced surface morphology development based on the concept of the surface as an advancing wave. (Auth.)

  13. Study of the processes of adsorption of amine-containing surface-active substance on the surface of Aluminum powder

    Directory of Open Access Journals (Sweden)

    Antonina Dyuryagina

    2012-03-01

    Full Text Available Equilibrium characteristics of adsorption on a surface of a pigment depending on concentration factors and temperature of the dispersive environment are defined. Kinetic laws of superficial activity of binary, threefold homogeneous and heterogeneous modeling systems are studied. The estimation of mechanisms of process of adsorption is carried out.

  14. Earth Surface Processes and Environmental Changes in Lake-catchment Systems(Earth Surface Processes, Natural Disasters and Historical Environmental Changes)

    OpenAIRE

    Kenji, KASHIWAYA; Institute of Nature and Environmental Technology, Kanazawa University

    2012-01-01

    Lake-catchment systems including continuous records of various climatic regimes are discussed for combining earth surface processes with temporal environmental changes. Three types of external forces (climatic, tectonic and anthropogenic), which are printed in lacustrine sediments and drainage landforms, are significant for understanding processes and changes. Present observations on small lake-catchment systems in Japan and past information on large lake-catchment systems in east Eurasia sho...

  15. Modeling, Fabrication and Testing of a Customizable Micromachined Hotplate for Sensor Applications.

    Science.gov (United States)

    Tommasi, Alessio; Cocuzza, Matteo; Perrone, Denis; Pirri, Candido Fabrizio; Mosca, Roberto; Villani, Marco; Delmonte, Nicola; Zappettini, Andrea; Calestani, Davide; Marasso, Simone Luigi

    2016-12-30

    In the sensors field the active sensing material frequently needs a controlled temperature in order to work properly. In microsystems technology, micro-machined hotplates represent a platform consisting of a thin suspended membrane where the sensing material can be deposited, usually integrating electrical stimuli and temperature readout. The micro-hotplate ensures a series of advantages such as miniaturized size, fast response, high sensitivity, low power consumption and selectivity for chemical sensing. This work compares the coplanar and the buried approach for the micro-hotplate heaters design with the aim to optimize the fabrication process and to propose a guideline for the choice of the suitable design with respect to the applications. In particular, robust Finite Element Method (FEM) models are set up in order to predict the electrical and thermal behavior of the micro-hotplates. The multiphysics approach used for the simulation allows to match as close as possible the actual device to the predictive model: geometries, materials, physics have been carefully linked to the fabricated devices to obtain the best possible accuracy. The materials involved in the fabrication process are accurately selected in order to improve the yield of the process and the performance of the devices. The fabricated micro-hotplates are able to warm the active region up to 400 °C (with a corresponding power consumption equal to 250 mW @ 400 °C) with a uniform temperature distribution in the buried micro-hotplate and a controlled temperature gradient in the coplanar one. A response time of about 70 ms was obtained on the virtual model, which perfectly agrees with the one measured on the fabricated device. Besides morphological, electrical and thermal characterizations, this work includes reliability tests in static and dynamic modes.

  16. Modeling, Fabrication and Testing of a Customizable Micromachined Hotplate for Sensor Applications

    Directory of Open Access Journals (Sweden)

    Alessio Tommasi

    2016-12-01

    Full Text Available In the sensors field the active sensing material frequently needs a controlled temperature in order to work properly. In microsystems technology, micro-machined hotplates represent a platform consisting of a thin suspended membrane where the sensing material can be deposited, usually integrating electrical stimuli and temperature readout. The micro-hotplate ensures a series of advantages such as miniaturized size, fast response, high sensitivity, low power consumption and selectivity for chemical sensing. This work compares the coplanar and the buried approach for the micro-hotplate heaters design with the aim to optimize the fabrication process and to propose a guideline for the choice of the suitable design with respect to the applications. In particular, robust Finite Element Method (FEM models are set up in order to predict the electrical and thermal behavior of the micro-hotplates. The multiphysics approach used for the simulation allows to match as close as possible the actual device to the predictive model: geometries, materials, physics have been carefully linked to the fabricated devices to obtain the best possible accuracy. The materials involved in the fabrication process are accurately selected in order to improve the yield of the process and the performance of the devices. The fabricated micro-hotplates are able to warm the active region up to 400 °C (with a corresponding power consumption equal to 250 mW @ 400 °C with a uniform temperature distribution in the buried micro-hotplate and a controlled temperature gradient in the coplanar one. A response time of about 70 ms was obtained on the virtual model, which perfectly agrees with the one measured on the fabricated device. Besides morphological, electrical and thermal characterizations, this work includes reliability tests in static and dynamic modes.

  17. Fabricating Super-hydrophobic Polydimethylsiloxane Surfaces by a Simple Filler-Dissolved Process

    Science.gov (United States)

    Lin, Yung-Tsan; Chou, Jung-Hua

    2010-12-01

    The self-cleaning effect of super-hydrophobic surfaces has attracted the attention of researchers. Typical ways of manufacturing super-hydrophobic surfaces include the use of either dedicated equipment or a complex chemical process. In this study, a simple innovative filler-dissolved method is developed using mainly powder salt and rinsing to form hydrophobic surfaces. This method can produce large super-hydrophobic surfaces with porous and micro rib surface structures. It can also be applied to curved surfaces, including flexible membranes. The contact angle of the manufactured artificial hydrophobic surface is about 160°. Furthermore, water droplets roll off the surface readily at a sliding angle of less than 5°, resembling the nonwetting lotus like effect.

  18. Pattern recognition of concrete surface cracks and defects using integrated image processing algorithms

    Science.gov (United States)

    Balbin, Jessie R.; Hortinela, Carlos C.; Garcia, Ramon G.; Baylon, Sunnycille; Ignacio, Alexander Joshua; Rivera, Marco Antonio; Sebastian, Jaimie

    2017-06-01

    Pattern recognition of concrete surface crack defects is very important in determining stability of structure like building, roads or bridges. Surface crack is one of the subjects in inspection, diagnosis, and maintenance as well as life prediction for the safety of the structures. Traditionally determining defects and cracks on concrete surfaces are done manually by inspection. Moreover, any internal defects on the concrete would require destructive testing for detection. The researchers created an automated surface crack detection for concrete using image processing techniques including Hough transform, LoG weighted, Dilation, Grayscale, Canny Edge Detection and Haar Wavelet Transform. An automatic surface crack detection robot is designed to capture the concrete surface by sectoring method. Surface crack classification was done with the use of Haar trained cascade object detector that uses both positive samples and negative samples which proved that it is possible to effectively identify the surface crack defects.

  19. Manufacturing of a micro-tungsten carbide electrode using a supersonic-aided electrolysis process

    International Nuclear Information System (INIS)

    Weng, Feng-Tsai; Ho, Chi-Ting

    2008-01-01

    In this study, a novel micromachining technology for fabricating micro parts was described. The original diameter of a tungsten carbide rod was 3 mm, and it was first processed to a rod with a diameter of 50 µm by a precision-grinding process. It could then be machined to the desired diameter by a supersonic-aided electrolysis process. A high-aspect ratio of the micro-tungsten carbide rod was easily obtained by this process. The surface roughness of the sample that was processed by electrolysis with supersonic-aided agitation was compared with that of the sample obtained without agitation. The machined surface of the sample was smooth, and the reason may be that ionized particles in the anode could be removed by supersonic-aided agitation during the electrolysis process. A microelectrode with a tip of approximately 1 µm could be obtained by this process. (technical note)

  20. Non-Lithographic Silicon Micromachining Using Inkjet and Chemical Etching

    Directory of Open Access Journals (Sweden)

    Sasha Hoshian

    2016-12-01

    Full Text Available We introduce a non-lithographical and vacuum-free method to pattern silicon. The method combines inkjet printing and metal assisted chemical etching (MaCE; we call this method “INKMAC”. A commercial silver ink is printed on top of a silicon surface to create the catalytic patterns for MaCE. The MaCE process leaves behind a set of silicon nanowires in the shape of the inkjet printed micrometer scale pattern. We further show how a potassium hydroxide (KOH wet etching process can be used to rapidly etch away the nanowires, producing fully opened cavities and channels in the shape of the original printed pattern. We show how the printed lines (width 50–100 µm can be etched into functional silicon microfluidic channels with different depths (10–40 µm with aspect ratios close to one. We also used individual droplets (minimum diameter 30 µm to produce cavities with a depth of 60 µm and an aspect ratio of two. Further, we discuss using the structured silicon substrate as a template for polymer replication to produce superhydrophobic surfaces.

  1. Si Micro-turbine by Proton BeamWriting and Porous Silicon Micromachining

    International Nuclear Information System (INIS)

    Rajta, I.; Szilasi, S.Z.; Fekete, Z.

    2008-01-01

    Complete text of publication follows. A 3D Si micro-turbine characterized by high aspect ratio vertical walls was formed by the combination of proton beam writing (PBW) and subsequent selective porous Si (PS) etching. Crystal damages generated by the implanted protons result in increased resistivity, thereby limit or even prevent the current to flow through the implanted area during electrochemical etching. Characteristic feature of the proposed process is that the shape of the micro electromechanical (MEMS) components is defined by two implantation energies. A higher energy is applied for defining the housing of the device while the lower energy is used to write the moving components. The implantation energies were selected such as to result appropriate difference between the two projected ranges, thereby providing structures with different height after development. The thickness of the walls of the moving component and the isotropic etching profile of the electrochemical PS formation was also taken into consideration. The electrochemical etching is driven until the sacrificial PS layer completely under etches the moving components, but the etch-front does not reach the bottom of the housing. Therefore, the dissolution of PS results in a ready-to-operate device with a released moving component embedded in the cavity of the housing. The operation of the encapsulated device fabricated by the two-energy implantation is successfully demonstrated (Fig. 1). Rotation speed of the device is estimated in the range of thousands rpm, however, further analysis of the novel structure optimized for performance and MEMS compatible assembly will be done and precise characteristics will be determined by adequate optical read-out method. The feasibility of Proton Beam Writing combined with Porous Si Micromachining and conventional Si processing steps was successfully demonstrated by fabricating Si microturbine chip. The aligned, two-energy proton beam implantation can provide high

  2. Air-coupled MUMPs capacitive micromachined ultrasonic transducers with resonant cavities.

    Science.gov (United States)

    Octavio Manzanares, Alberto; Montero de Espinosa, Francisco

    2012-04-01

    This work reports performance improvements of air-coupled capacitive micromachined ultrasonic transducers (CMUTs) using resonant cavities. In order to perform this work, we have designed and manufactured a CMUT employing multi-user microelectromechanical systems (MEMS) processes (MUMPs). The transducer was designed using Helmholtz resonator principles. This was characterised by the dimensions of the cavity and several acoustic ports, which had the form of holes in the CMUT plate. The MUMPs process has the advantage of being low cost which allows the manufacture of economic prototypes. In this paper we show the effects of the resonant cavities and acoustic ports in CMUTs using laser Doppler vibrometry and acoustical measurements. We also use Finite Element (FE) simulations in order to support experimental measurements. The results show that it is possible to enhance the output pressure and bandwidth in air by tuning the resonance frequency of the plate (f(p)) with that of the Helmholtz resonator (f(H)). The experimental measurements show the plate resonance along with an additional resonance in the output pressure spectrum. This appears due to the effect of the new resonant cavities in the transducer. FE simulations show an increase of 11 dB in the output pressure with respect to that of a theoretical vacuum-sealed cavity MUMPs CMUT by properly tuning the transducer. The bandwidth has been also analyzed by calculating the mechanical Q factor of the tuned CMUT. This has been estimated as 4.5 compared with 7.75 for the vacuum-sealed cavity MUMPs CMUT. Copyright © 2011 Elsevier B.V. All rights reserved.

  3. Non destructive evaluation of residual stresses in welding and hard-surfacing processes

    International Nuclear Information System (INIS)

    Suarez, J.C.; Fernandez, L.M.; Cruz, C.; Aragon, B.; Merino, F.

    1995-01-01

    In this paper transversal and longitudinal stress profiles in welding and hard-surfacing by welding processes are presented. The stresses were measured by RMS of Barkhausen signal. In this work it is shown that in each case the level of stresses is strongly dependent on the number of weld beads of surfacing layers deposited. The subsequent deposition of new weld beads or surfacing layers produces a stress-relieving effect

  4. Development of Statistical Process Control Methodology for an Environmentally Compliant Surface Cleaning Process in a Bonding Laboratory

    Science.gov (United States)

    Hutchens, Dale E.; Doan, Patrick A.; Boothe, Richard E.

    1997-01-01

    Bonding labs at both MSFC and the northern Utah production plant prepare bond test specimens which simulate or witness the production of NASA's Reusable Solid Rocket Motor (RSRM). The current process for preparing the bonding surfaces employs 1,1,1-trichloroethane vapor degreasing, which simulates the current RSRM process. Government regulations (e.g., the 1990 Amendments to the Clean Air Act) have mandated a production phase-out of a number of ozone depleting compounds (ODC) including 1,1,1-trichloroethane. In order to comply with these regulations, the RSRM Program is qualifying a spray-in-air (SIA) precision cleaning process using Brulin 1990, an aqueous blend of surfactants. Accordingly, surface preparation prior to bonding process simulation test specimens must reflect the new production cleaning process. The Bonding Lab Statistical Process Control (SPC) program monitors the progress of the lab and its capabilities, as well as certifies the bonding technicians, by periodically preparing D6AC steel tensile adhesion panels with EA-91 3NA epoxy adhesive using a standardized process. SPC methods are then used to ensure the process is statistically in control, thus producing reliable data for bonding studies, and identify any problems which might develop. Since the specimen cleaning process is being changed, new SPC limits must be established. This report summarizes side-by-side testing of D6AC steel tensile adhesion witness panels and tapered double cantilevered beams (TDCBs) using both the current baseline vapor degreasing process and a lab-scale spray-in-air process. A Proceco 26 inches Typhoon dishwasher cleaned both tensile adhesion witness panels and TDCBs in a process which simulates the new production process. The tests were performed six times during 1995, subsequent statistical analysis of the data established new upper control limits (UCL) and lower control limits (LCL). The data also demonstrated that the new process was equivalent to the vapor

  5. Characterization of surface processes on mineral surfaces in aqueous solutions. Annual report for fiscal year 1993

    International Nuclear Information System (INIS)

    Leckie, J.O.

    1993-11-01

    Performance assessments by Los Alamos National Laboratory for the DOE's Yucca Mountain Site Characterization Project (YMP) are being done investigating the environmental risk related to long-term disposal of hazardous wastes resulting from the use of radioactive materials that must subsequently be isolated from the environment. The YMP site, located in southwestern Nevada, is intended for the storage of high-level wastes generated by nuclear energy-related activities, including spent fuel and waste from reprocessed fuel rods. The work covered by this contract is necessary for producing a defensible model and dataset, and may be critical for evaluation of repository compliance. This work, performed by the Environmental Engineering and Science research group at Stanford University, will quantify the adsorption of uranyl on various minerals. The project's principle objective is to provide sorption coefficients for uranyl and other ions of interest to predict radionuclide movements form the repository to accessible environments. This adsorption data is essential for the unambiguous interpretation of field experiments and observations. In this report, details of the activity and progress made with respect to the study of uranyl adsorption on mineral surfaces is presented and discussed

  6. Experimental determination of void fraction in surface aeration using image processing technique

    Energy Technology Data Exchange (ETDEWEB)

    Mohammadpur, Amir; Akhavan-Behabadi, Mohammad Ali; Ebrahimzaedh, Masoud; Hanafizadeh, Pedram; Raisee, Mehrdad [University of Tehran, Tehran (Iran, Islamic Republic of)

    2015-06-15

    In this paper, a new method for determination of void fraction in surface aeration process is presented and discussed. The proposed method is based on the image processing technique. The experimental setup has been designed to create various surface aeration conditions in the water. Void fraction has been calculated for the wide range of water height, impeller immersion depth and rotational speed. Experiments have been performed in an open cubic tank with side length of 60 cm, equipped with one Rushton disk turbine. Moreover, the void fraction has been measured with level gauge method. The results showed that the image processing technique provides more accurate results than the level gauge measurements for void fraction calculation in surface aeration especially in low void fraction aeration. In addition, the experimental data revealed that increase in impeller immersion depth and rotational speed increase void fraction and oxygen transfer rate in surface aeration process.

  7. Scaling up ecohydrological processes: role of surface water flow in water-limited landscapes

    CSIR Research Space (South Africa)

    Popp, A

    2009-11-01

    Full Text Available microscale processes like ecohydrological feedback mechanisms and spatial exchange like surface water flow, the authors derive transition probabilities from a fine-scale simulation model. They applied two versions of the landscape model, one that includes...

  8. Effects of process parameters on surface roughness in abrasive waterjet cutting of aluminium

    Science.gov (United States)

    Chithirai Pon Selvan, M.; Mohana Sundara Raju, N.; Sachidananda, H. K.

    2012-12-01

    Abrasive waterjet cutting is a novel machining process capable of processing wide range of hard-to-cut materials. Surface roughness of machined parts is one of the major machining characteristics that play an important role in determining the quality of engineering components. This paper shows the influence of process parameters on surface roughness ( R a) which is an important cutting performance measure in abrasive waterjet cutting of aluminium. Taguchi's design of experiments was carried out in order to collect surface roughness values. Experiments were conducted in varying water pressure, nozzle traverse speed, abrasive mass flow rate and standoff distance for cutting aluminium using abrasive waterjet cutting process. The effects of these parameters on surface roughness have been studied based on the experimental results.

  9. Theoretical and experimental approach to the texturization process of bioreactive surfaces by high-power laser

    Science.gov (United States)

    Conde, J. C.; Riveiro, A.; Comesana, R.; Pou, J.

    2011-11-01

    The properties of orthopaedic/dental implants can be tuned through the laser surface modifications that take place during a laser ablation process. Processing assisted by a laser is adequate to produce macro- and micro-structures on metallic alloys and polymer surfaces in order to improve their biological response. The evaluation of the minimum energy density that causes an optimum ablation process on different kinds of surfaces was theoretically established by numerical simulation of the thermal process and some experiments have been systematically carried out to produce a periodic pattern in the surface. The selection of the laser power has been predicted from numerical analysis solving of the heat conduction differential equation using commercial software, ANSYS (11.0). This analysis has allowed us to predict the extent and the depth of the holes. The theoretical results agree with the experimental measurements that were carried out by profilometry.

  10. The effect of mold surface topography on plastic parat in-process shrinkage in injection molding

    DEFF Research Database (Denmark)

    Arlø, Uffe Rolf; Hansen, Hans Nørgaard; Kjær, Erik Michael

    2003-01-01

    An experimental study of the effect of mold surface roughness on in-process in-flow linear part shrinkage in injection molding has been carried out. The investigation is based on an experimental two-cavity tool, where the cavities have different surface topographies, but are otherwise identical...

  11. A facile two-step dipping process based on two silica systems for a superhydrophobic surface.

    Science.gov (United States)

    Li, Xiaoguang; Shen, Jun

    2011-10-14

    A silica microsphere suspension and a silica sol are employed in a two-step dipping process for the preparation of a superhydrophobic surface. It's not only a facile way to achieve the lotus effect, but can also create a multi-functional surface with different wetabilities, adhesive forces and transparencies. This journal is © The Royal Society of Chemistry 2011

  12. Coupled Deep Earth and surface processes and their impact on geohazards

    NARCIS (Netherlands)

    Cloetingh, S.; Tibaldi, A.; Burov, E.

    2012-01-01

    Better understanding of coupled Deep Earth and surface processes is the key for resolving the evolution of the continental lithosphere and its surface topography. The thermo-mechanical structure of the lithosphere exerts a prime control on the interaction of mantle instabilities and tectonic forces

  13. Fabrication of superhydrophobic wood surfaces via a solution-immersion process

    Science.gov (United States)

    Liu, Changyu; Wang, Shuliang; Shi, Junyou; Wang, Chengyu

    2011-11-01

    Superhydrophobic wood surfaces were fabricated from potassium methyl siliconate (PMS) through a convenient solution-immersion method. The reaction involves a hydrogen bond assembly and a polycondensation process. The silanol was formed by reacting PMS aqueous solution with CO2, which was assembled on the wood surface via hydrogen bonds with the wood surface -OH groups. The polymethylsilsesquioxane coating was obtained through the polycondensation reaction of the hydroxyl between wood and silanol. The morphology of products were characterized using a scanning electron microscope (SEM), the surface chemical composition was determined using energy dispersive X-ray analysis (EDXA), Fourier transform infrared spectroscopy (FT-IR), thermogravimetry (TGA) and contact angle measurement. Analytical results revealed that rough protuberances uniformly covered the wood surface, thus transforming the wood surface from hydrophilic to superhydrophobic. The water contact angle of the superhydrophobic wood surface was about 153° and a sliding angle was 4.6°.

  14. Modeling and simulation of the deformation process of PTFE flexiblestamps for nanoimprint lithography on curved surfaces

    DEFF Research Database (Denmark)

    Sonne, Mads Rostgaard; Smistrup, K.; Hannibal, Morten

    2015-01-01

    In the presented work, simulations of the deformation process of flexible stamps used for nanoimprint lithographron curved surfaces are presented. The material used for the flexible stamps was polytetrafluoroethylene (PTFE) whose material behavior was found to be viscoelastic-viscoplastic. This b......In the presented work, simulations of the deformation process of flexible stamps used for nanoimprint lithographron curved surfaces are presented. The material used for the flexible stamps was polytetrafluoroethylene (PTFE) whose material behavior was found to be viscoelastic...

  15. Linear and nonlinear characterization of surfaces from a laser beam melt ablation process

    Energy Technology Data Exchange (ETDEWEB)

    Bube, Kevin [Institut fuer Chemie und Biologie des Meeres, Carl-von-Ossietzky Universitaet Oldenburg, Postfach 2503, D-26111 Oldenburg (Germany); Neto, Camilo Rodrigues [Institut fuer Chemie und Biologie des Meeres, Carl-von-Ossietzky Universitaet Oldenburg, Postfach 2503, D-26111 Oldenburg (Germany); University of Sao Paulo, Av. Arlindo Bettio 1000, EACH, 03828-000 Sao Paulo (Brazil); Donner, Reik [Department of Physics, University of Potsdam, Am Neuen Palais 10, D-14469 Potsdam (Germany); Schwarz, Udo [Department of Physics, University of Potsdam, Am Neuen Palais 10, D-14469 Potsdam (Germany); Feudel, Ulrike [Institut fuer Chemie und Biologie des Meeres, Carl-von-Ossietzky Universitaet Oldenburg, Postfach 2503, D-26111 Oldenburg (Germany)

    2006-04-07

    We apply linear and nonlinear methods to study the properties of surfaces generated by a laser beam melt ablation process. As a result we present a characterization and ordering of the surfaces depending on the adjusted process parameters. Our findings give some insight into the performance of two widely applied multifractal analysis methods-the detrended fluctuation analysis and the wavelet transform modulus maxima method-on short real world data.

  16. Long-life micro vacuum chamber for a micromachined cryogenic cooler

    NARCIS (Netherlands)

    Cao, Haishan; Vermeer, Cristian Hendrik; Vanapalli, Srinivas; Holland, Herman J.; ter Brake, Hermanus J.M.

    2015-01-01

    Micromachined cryogenic coolers can be used for cooling small electronic devices to improve their performance. However, for reaching cryogenic temperatures, they require a very good thermal insulation from the warm environment. This is established by a vacuum space that for adequate insulation has

  17. Angular Random Walk Estimation of a Time-Domain Switching Micromachined Gyroscope

    Science.gov (United States)

    2016-10-19

    TECHNICAL DOCUMENT 3308 September 2016 Angular Random Walk Estimation of a Time-Domain Switching Micromachined Gyroscope Andrew B. Sabater Paul...angular random walk (ARW), bias instability, and scale factor instability. While there are methods to address issues with bias and scale factor...8 4. ANGULAR RANDOM WALK CHARACTERIZATION

  18. Sensitivity of Micromachined Joule-Thomson Cooler to Clogging Due to Moisture

    NARCIS (Netherlands)

    Cao, Haishan; Vanapalli, Srinivas; Holland, Herman J.; Vermeer, Cristian Hendrik; ter Brake, Hermanus J.M.

    2015-01-01

    A major issue in long-term operation of micromachined Joule-Thomson coolers is the clogging of the microchannels and/or the restriction due to the deposition of water molecules present in the working fluid. In this study, we present the performance of a microcooler operated with nitrogen gas with

  19. Femtosecond laser micromachining of polylactic acid/graphene composites for designing interdigitated microelectrodes for sensor applications

    Science.gov (United States)

    Paula, Kelly T.; Gaál, Gabriel; Almeida, G. F. B.; Andrade, M. B.; Facure, Murilo H. M.; Correa, Daniel S.; Riul, Antonio; Rodrigues, Varlei; Mendonça, Cleber R.

    2018-05-01

    There is an increasing interest in the last years towards electronic applications of graphene-based materials and devices fabricated from patterning techniques, with the ultimate goal of high performance and temporal resolution. Laser micromachining using femtosecond pulses is an attractive methodology to integrate graphene-based materials into functional devices as it allows changes to the focal volume with a submicrometer spatial resolution due to the efficient nonlinear nature of the absorption, yielding rapid prototyping for innovative applications. We present here the patterning of PLA-graphene films spin-coated on a glass substrate using a fs-laser at moderate pulse energies to fabricate interdigitated electrodes having a minimum spatial resolution of 5 μm. Raman spectroscopy of the PLA-graphene films indicated the presence of multilayered graphene fibers. Subsequently, the PLA-graphene films were micromachined using a femtosecond laser oscillator delivering 50-fs pulses and 800 nm, where the pulse energy and scanning speed was varied in order to determine the optimum irradiation parameters (16 nJ and 100 μm/s) to the fabrication of microstructures. The micromachined patterns were characterized by optical microscopy and submitted to electrical measurements in liquid samples, clearly distinguishing all tastes tested. Our results confirm the femtosecond laser micromachining technique as an interesting approach to efficiently pattern PLA-graphene filaments with high precision and minimal mechanical defects, allowing the easy fabrication of interdigitated structures and an alternative method to those produced by conventional photolithography.

  20. A micromachined silicon valve driven by a miniature bi-stable electro-magnetic actuator

    NARCIS (Netherlands)

    Bohm, S.; Burger, G.J.; Burger, G.J.; Korthorst, M.T.; Roseboom, F.

    2000-01-01

    In this paper a novel combination of a micromachined silicon valve with low dead volume and a bi-stable electromagnetic actuator produced by conventional machining is presented. The silicon valve part, 7×7×1 mm3 in dimensions, is a sandwich construction of two KOH etched silicon wafers with a layer

  1. New technique for fabrication of high frequency piezoelectric Micromachined Ultrasound Transducers

    DEFF Research Database (Denmark)

    Pedersen, T; Thomsen, Erik Vilain; Zawada, T

    2008-01-01

    A novel technique for fabrication of linear arrays of high frequency piezoelectric Micromachined Ultrasound Transducers (pMUT) on silicon substrates is presented. Piezoelectric elements are formed by deposition of PZT ((PbZrxTi1-x)O3) into etched features of the silicon substrate...

  2. Unique Femtosecond Micromachining Methods in Semi-Insulating and Conducting Silicon Carbide (Preprint)

    National Research Council Canada - National Science Library

    Brewer, Chris; Dorsey, Don; Campbell, Angela; Juhl, Shane; DesAutels, G. L; Finet, Marc; Ristich, Scott; Whitaker, Matt; Powers, Peter E; Zhan, Qiwen

    2007-01-01

    ...); a wide bandgap semiconductor material provided by Wright-Patterson AFB AFRL/MLPS. Gratings were micro-machined into these materials using a novel anamorphic lens design and an automated x, y, z linear stage to control the sample position...

  3. The role of original surface roughness in laser-induced periodic surface structure formation process on poly-carbonate films

    International Nuclear Information System (INIS)

    Csete, M.; Hild, S.; Plettl, A.; Ziemann, P.; Bor, Zs.; Marti, O.

    2004-01-01

    Poly-carbonate films containing different types of original surface roughness were illuminated by a polarized ArF excimer laser beam having a fluence of 4 mJ/cm 2 . Atomic force microscopy was applied to study the laser-induced periodic surface structure formation process at 0 deg. , 30 deg. and 45 deg. angles of incidence. The effect of initial surface structures on the intensity distribution was investigated in cases of: (a) grains on oriented and amorphous thick films; (b) holes on thin spin-coated films; and (c) nanoparticles arranged along micrometer long sides of hexagons below the spin-coated films. The presence of the scattering objects caused symmetry breaking, if the samples were illuminated by oblique incident 's' polarized beam. The Fourier analysis of the AFM pictures has shown the competition of structures having different periods. The characteristic of the permanent surface patterns proved that the interference of the incoming beam and the beams scattered on previously existing structures is the LIPSS generating feedback process. Ring-shaped structures having 228 nm diameter were produced

  4. Fabrication of corrugated artificial insect wings using laser micromachined molds

    International Nuclear Information System (INIS)

    Tanaka, Hiroto; Wood, Robert J

    2010-01-01

    This paper describes the fabrication of an artificial insect wing with a rich set of topological features by micromolding a thermosetting resin. An example 12 mm long hoverfly-like wing is fabricated with 50–125 µm vein heights and 100 µm corrugation heights. The solid veins and membrane were simultaneously formed and integrated by a single molding process. Employing a layered laser ablation technique, three-dimensional molds were created with 5 µm resolution in height. Safe demolding of the wing was achieved with a water-soluble sacrificial layer on the mold. Measured surface profiles of the wing matched those of the molds, demonstrating the high replication accuracy of this molding process. Using this process, the morphological features of insect wings can be replicated at-scale with high precision, enabling parametric experiments of the functional morphology of insect wings. This fabrication capability also makes it possible to create a variety of wing types for micro air vehicles on scales similar to insects.

  5. Effect of electropulsing on surface mechanical properties and microstructure of AISI 304 stainless steel during ultrasonic surface rolling process

    Energy Technology Data Exchange (ETDEWEB)

    Wang, Haibo [Advanced Materials Institute, Graduate School at Shenzhen, Tsinghua University, Shenzhen 518055 (China); Key Laboratory of Advanced Materials, Tsinghua University, Beijing 100084 (China); Song, Guolin [Advanced Materials Institute, Graduate School at Shenzhen, Tsinghua University, Shenzhen 518055 (China); Tang, Guoyi, E-mail: tanggy@mail.tsinghua.edu.cn [Advanced Materials Institute, Graduate School at Shenzhen, Tsinghua University, Shenzhen 518055 (China); Key Laboratory of Advanced Materials, Tsinghua University, Beijing 100084 (China)

    2016-04-26

    The present work integrates 3D digital optical microscopy (OM), nano-indentation, X-ray diffraction (XRD), scanning electron microscopy (SEM) with electron backscatter diffraction (EBSD) and transmission electron microscopy (TEM) to systematically investigate the effect of electropulsing on the surface mechanical properties and microstructure of AISI 304 stainless steel during the ultrasonic surface rolling process (USRP). Compared with the original USRP, the introduction of electropulsing with optimal parameters can effectively facilitate surface crack healing and improve surface hardness and wear resistance dramatically, and the residual compressive stress is further enhanced. Meanwhile, more martensite phase and fewer deformation twins can be found in the strengthened layer. Rapid improvement of the surface mechanical properties should be attributed to the ultra-refined grains, accelerated martensitic phase transformation and suppressed deformation twining induced by the coupling effect of USRP and electropulsing. The high strain rate given by USRP, increased stacking fault energy and accelerated dislocation mobility caused by electropulsing are likely the primary intrinsic reasons for the observed phenomena.

  6. Processing method and processing device for liquid waste containing surface active agent and radioactive material

    International Nuclear Information System (INIS)

    Nishi, Takashi; Matsuda, Masami; Baba, Tsutomu; Yoshikawa, Ryozo; Yukita, Atsushi.

    1998-01-01

    Washing liquid wastes containing surface active agents and radioactive materials are sent to a deaerating vessel. Ozone is blown into the deaerating vessel. The washing liquid wastes dissolved with ozone are introduced to a UV ray irradiation vessel. UV rays are irradiated to the washing liquid wastes, and hydroxy radicals generated by photodecomposition of dissolved ozone oxidatively decompose surface active agents contained in the washing liquid wastes. The washing liquid wastes discharged from the UV ray irradiation vessel are sent to an activated carbon mixing vessel and mixed with powdery activated carbon. The surface active agents not decomposed in the UV ray irradiation vessel are adsorbed to the activated carbon. Then, the activated carbon and washing liquid wastes are separated by an activated carbon separating/drying device. Radioactive materials (iron oxide and the like) contained in the washing liquid wastes are mostly granular, and they are separated and removed from the washing liquid wastes in the activated carbon separating/drying device. (I.N.)

  7. Friction stir processed Al - Metal oxide surface composites: Anodization and optical appearance

    DEFF Research Database (Denmark)

    Gudla, Visweswara Chakravarthy; Jensen, Flemming; Canulescu, Stela

    2014-01-01

    Multiple-pass friction stir processing (FSP) was employed to impregnate metal oxide (TiO2, Y2O3 and CeO2) particles into the surface of an Aluminium alloy. The surface composites were then anodized in a sulphuric acid electrolyte. The effect of anodizing parameters on the resulting optical...... appearance was studied. Microstructural and morphological characterization was performed using transmission electron microscopy (TEM). The surface appearance was analysed using an integrating sphere-spectrometer setup. Increasing the anodizing voltage changed the surface appearance of the composites from...

  8. Assessment of surface contamination level in an operating uranium ore processing facility of Jaduguda, India

    International Nuclear Information System (INIS)

    Meena, J.S.; Patnaik, R.L.; Jha, V.N.; Sahoo, S.K.; Ravi, P.M.; Tripathi, R.M.

    2014-01-01

    Radiological concern of the occupational workers and the area is given priority over other safety issue in confirmation with the stipulated guideline of national regulatory agency (AERB/FEFCF/SG-2, 2007). The key concern from the radiological hazard evaluation point of view is air activity, external gamma level and surface contamination. Present investigations was carried out to ascertain the surface contamination level of uranium ore processing facility at Jaduguda, Jharkhand. For a low grade uranium ore processing industry surface contamination is a major concern in product precipitation and recovery section. In view of this, the ore processing plant can broadly be classified into three areas i.e. ion exchange area, precipitation and product recovery section and other areas. The monitoring results incorporate the level of surface contamination of the plant during the last five years. The geometric mean activity of surface contamination level was 31.1, 34.5 and 9.8 Bq dm -2 in ion exchange, product precipitation and recovery and other areas with GSD of 2, 2.5 and 1.9. In most of the cases the surface contamination level was well within the recommended limit of 100 Bq dm -2 for M class uranium compound. Occasional cases of surface contamination levels exceeding the recommended limit were addressed and areas were decontaminated. Based on the study, modification in the design feature of the surface of the finished product section was also suggested so that the decontamination procedure can be more effectively implemented

  9. Non-adiabatic effects in elementary reaction processes at metal surfaces

    Science.gov (United States)

    Alducin, M.; Díez Muiño, R.; Juaristi, J. I.

    2017-12-01

    Great success has been achieved in the modeling of gas-surface elementary processes by the use of the Born-Oppenheimer approximation. However, in metal surfaces low energy electronic excitations are generated even by thermal and hyperthermal molecules due to the absence of band gaps in the electronic structure. This shows the importance of performing dynamical simulations that incorporate non-adiabatic effects to analyze in which way they affect most common gas-surface reactions. Here we review recent theoretical developments in this problem and their application to the study of the effect of electronic excitations in the adsorption and relaxation of atoms and molecules in metal surfaces, in scattering processes, and also in recombinative processes between impinging atoms and adsorbates at the surface. All these studies serve us to establish what properties of the gas-surface interaction favor the excitation of low-energy electron-hole pairs. A general observation is that the nature of these excitations usually requires long lasting interactions at the surface in order to observe deviations from the adiabatic behaviour. We also provide the basis of the local density friction approximation (LDFA) that have been used in all these studies, and show how it has been employed to perform ab initio molecular dynamics with electronic friction (AIMDEF). As a final remark, we will shortly review on recent applications of the LDFA to successfully simulate desorption processes induced by intense femtosecond laser pulses.

  10. Auto-recognition of surfaces and auto-generation of material removal volume for finishing process

    Science.gov (United States)

    Kataraki, Pramod S.; Salman Abu Mansor, Mohd

    2018-03-01

    Auto-recognition of a surface and auto-generation of material removal volumes for the so recognised surfaces has become a need to achieve successful downstream manufacturing activities like automated process planning and scheduling. Few researchers have contributed to generation of material removal volume for a product but resulted in material removal volume discontinuity between two adjacent material removal volumes generated from two adjacent faces that form convex geometry. The need for limitation free material removal volume generation was attempted and an algorithm that automatically recognises computer aided design (CAD) model’s surface and also auto-generate material removal volume for finishing process of the recognised surfaces was developed. The surfaces of CAD model are successfully recognised by the developed algorithm and required material removal volume is obtained. The material removal volume discontinuity limitation that occurred in fewer studies is eliminated.

  11. Analysis of WEDM Process Parameters on Surface Roughness and Kerf using Taguchi Method

    Directory of Open Access Journals (Sweden)

    Asfana Banu

    2017-12-01

    Full Text Available In obtaining the best quality of engineering parts, the quality of machined surface plays an essential role. The fatigue strength, wear resistance, and corrosion of workpiece are some of the aspects of the qualities that can be improved. This paper investigates the effect of wire electrical discharge machining (WEDM process parameters on surface roughness and kerf on stainless steel using distilled water as dielectric fluid and brass wire as tool electrode. The selected process parameters are voltage open, wire speed, wire tension, voltage gap, and off time. Empirical models using Taguchi method were developed for the estimation of surface roughness and kerf. The analysis revealed that off time has major influence on surface roughness and kerf. The optimum machining parameters for minimum surface roughness and kerf were found to be 10 V open voltage, 2.84 µs off time, 12 m/min wire speed, 6.3 N wire tension, and 54.91 V voltage gap.

  12. Specifics of adsorption and chemical processes on the surface of gamma-irradiated vanadium dioxide

    International Nuclear Information System (INIS)

    Kaurkovskaya, V.N.; Dzyubenko, L.S.; Doroshenko, V.N.; Chujko, A.A.; Shakhov, A.P.

    2006-01-01

    Effect of γ-irradiation on electrophysical properties and processes of thermal desorption of water from the surface of vanadium oxides V 2 O 3 -VO 2-δ -VO 2+δ -V 2 O 5 was investigated by derivatography and electric conductivity. Content of adsorbed water at the surface and phase composition of the surface was demonstrated to change under the action of low radiation doses. Surface electric conductivity of the irradiated samples VO 2-δ in the process of chemical reactions of adsorbed following irradiation benzoic acid and ethanol was established to be much above than in irradiated-free ones. It is presumed that metal-semiconductor phase transition at the surface of VO 2-δ during chemical reaction is intensified by irradiation [ru

  13. Capacitive micromachined ultrasonic transducer for ultra-low pressure measurement: Theoretical study

    Directory of Open Access Journals (Sweden)

    Zhikang Li

    2015-12-01

    Full Text Available Ultra-low pressure measurement is necessary in many areas, such as high-vacuum environment monitoring, process control and biomedical applications. This paper presents a novel approach for ultra-low pressure measurement where capacitive micromachined ultrasonic transducers (CMUTs are used as the sensing elements. The working principle is based on the resonant frequency shift of the membrane under the applied pressure. The membranes of the biased CMUTs can produce a larger resonant frequency shift than the diaphragms with no DC bias in the state-of-the-art resonant pressure sensors, which contributes to pressure sensitivity improvement. The theoretical analysis and finite element method (FEM simulation were employed to study the relationship between the resonant frequency and the pressure. The results demonstrated excellent capability of the CMUTs for ultra-low pressure measurement. It is shown that the resonant frequency of the CMUT varies linearly with the applied pressure. A sensitivity of more than 6.33 ppm/Pa (68 kHz/kPa was obtained within a pressure range of 0 to 100 Pa when the CMUTs were biased at a DC voltage of 90% of the collapse voltage. It was also demonstrated that the pressure sensitivity can be adjusted by the DC bias voltage. In addition, the effects of air damping and ambient temperature on the resonant frequency were also studied. The effect of air damping is negligible for the pressures below 1000 Pa. To eliminate the temperature effect on the resonant frequency, a temperature compensating method was proposed.

  14. Microwave design and analysis of a micromachined self-heating power sensor based on matching thermocouples

    Science.gov (United States)

    Zhang, Zhiqiang; Liao, Xiaoping

    2017-08-01

    Microwave performance is a basic index of the sensors used at microwave frequencies, but also affects the sensing output. For the purpose of low-loss microwave applications, it is important for different microwave sensors to develop microwave design. This paper presents the microwave design and analysis of a micromachined self-heating microwave power sensor in the GaAs MMIC process, where the microwave power is dissipated and converted into output thermovoltages by two matching thermocouples. A dc-blocking capacitor is connected to the thermocouples in series and used to avoid the output short-circuit. In order to characterize the microwave performance, an S-parameter model of this self-heating power sensor is established. Using the model, the effects of the capacitor and the thermocouples on the reflection loss are investigated under different microwave frequencies. To demonstrate the validity of the microwave model, the microwave performance of the self-heating sensor is simulated using an electromagnetic software. In the simulation, the relationship between the substrate membrane underneath the thermocouples and the reflection loss is analyzed. Measured reflection losses of the self-heating sensor are between  -15.5 to  -15.9 dB at 8-12 GHz. The measured results show good agreement with the microwave model and simulation, and the source of small deviations is discussed. The proposed microwave design and analysis contributes to achieving low reflection loss for the sensor, with the fact that more power is used to convert into the thermovoltages.

  15. A smart fully integrated micromachined separator with soft magnetic micro-pillar arrays for cell isolation

    Science.gov (United States)

    Dong, Tao; Su, Qianhua; Yang, Zhaochu; Zhang, Yulong; Egeland, Eirik B.; Gu, Dan D.; Calabrese, Paolo; Kapiris, Matteo J.; Karlsen, Frank; Minh, Nhut T.; Wang, K.; Jakobsen, Henrik

    2010-11-01

    A smart fully integrated micromachined separator with soft magnetic micro-pillar arrays has been developed and demonstrated, which can merely employ one independent lab-on-chip to realize cell isolation. The simulation, design, microfabrication and test for the new electromagnetic micro separator were executed. The simulation results of the electromagnetic field in the separator show that special soft magnetic micro-pillar arrays can amplify and redistribute the electromagnetic field generated by the micro-coils. The separator can be equipped with a strong magnetic field to isolate the target cells with a considerably low input current. The micro separator was fabricated by micro-processing technology. An electroplating bath was hired to deposit NiCo/NiFe to fabricate the micro-pillar arrays. An experimental system was set up to verify the function of the micro separator by isolating the lymphocytes, in which the human whole blood mixed with Dynabeads® FlowComp Flexi and monoclonal antibody MHCD2704 was used as the sample. The results show that the electromagnetic micro separator with an extremely low input current can recognize and capture the target lymphocytes with a high efficiency, the separation ratio reaching more than 90% at a lower flow rate. For the electromagnetic micro separator, there is no external magnetizing field required, and there is no extra cooling system because there is less Joule heat generated due to the lower current. The magnetic separator is totally reusable, and it can be used to separate cells or proteins with common antigens.

  16. Polyimide and Metals MEMS Multi-User Processes

    KAUST Repository

    Arevalo, Arpys

    2016-11-01

    The development of a polyimide and metals multi-user surface micro-machining process for Micro-electro-mechanical Systems (MEMS) is presented. The process was designed to be as general as possible, and designed to be capable to fabricate different designs on a single silicon wafer. The process was not optimized with the purpose of fabricating any one specific device but can be tweaked to satisfy individual needs depending on the application. The fabrication process uses Polyimide as the structural material and three separated metallization layers that can be interconnected depending on the desired application. The technology allows the development of out-of-plane compliant mechanisms, which can be combined with six variations of different physical principles for actuation and sensing on a single processed silicon wafer. These variations are: electrostatic motion, thermal bimorph actuation, capacitive sensing, magnetic sensing, thermocouple-based sensing and radio frequency transmission and reception.

  17. Surface Nano Structures Manufacture Using Batch Chemical Processing Methods for Tooling Applications

    DEFF Research Database (Denmark)

    Tosello, Guido; Calaon, Matteo; Gavillet, J.

    2011-01-01

    The patterning of large surface areas with nano structures by using chemical batch processes to avoid using highenergy intensive nano machining processes was investigated. The capability of different surface treatment methods of creating micro and nano structured adaptable mould inserts...... for subsequent polymer replication by injection moulding was analyzed. New tooling solutions to produce nano structured mould surfaces were investigated. Experiments based on three different chemical-based-batch techniques to establish surface nano (i.e. sub-μm) structures on large areas were performed. Three...... approaches were selected: (1) using Ø500 nm nano beads deposition for direct patterning of a 4” silicon wafer; (2) using Ø500 nm nano beads deposition as mask for 4” silicon wafer etching and subsequent nickel electroplating; (3) using the anodizing process to produce Ø500 nm structures on a 30x80 mm2...

  18. Effect of conditioner load on the polishing pad surface during chemical mechanical planarization process

    Energy Technology Data Exchange (ETDEWEB)

    Shin, Cheol Min; Qin, Hong Yi; Hong, Seok Jun; Jeon, Sang Hyuk; Kulkarni, Atul; Kim, Tae Sun [Sungkyunkwan University, Suwon (Korea, Republic of)

    2016-12-15

    During the Chemical mechanical planarization (CMP), the pad conditioning process can affect the pad surface characteristics. Among many CMP process parameters, the improper applied load on the conditioner arm may have adverse effects on the polyurethane pad. In this work, we evaluated the pad surface properties under the various conditioner arm applied during pad conditioning process. The conditioning pads were evaluated for surface topography, surface roughness parameters such as Rt and Rvk and Material removal rate (MRR) and within-wafer non-uniformity after wafer polishing. We observed that, the pad asperities were collapsed in the direction of conditioner rotation and blocks the pad pores applied conditioner load. The Rvk value and MRR were founded to be in relation with 4 > 1 > 7 kgF conditioner load. Hence, this study shows that, 4 kgF applied load by conditioner is most suitable for the pad conditioning during CMP.

  19. Effects of soil surface roughness on interrill erosion processes and sediment particle size distribution

    Science.gov (United States)

    Ding, Wenfeng; Huang, Chihua

    2017-10-01

    Soil surface roughness significantly impacts runoff and erosion under rainfall. Few previous studies on runoff generation focused on the effects of soil surface roughness on the sediment particle size distribution (PSD), which greatly affects interrill erosion and sedimentation processes. To address this issue, a rainfall-simulation experiment was conducted with treatments that included two different initial soil surface roughnesses and two rainfall intensities. Soil surface roughness was determined by using photogrammetric method. For each simulated event, runoff and sediment samples were collected at different experimental times. The effective (undispersed) PSD of each sediment sample and the ultimate (after dispersion) PSD were used to investigate the detachment and transport mechanisms involved in sediment movement. The results show that soil surface roughness significantly delayed runoff initiation, but had no significant effect on the steady runoff rate. However, a significant difference in the soil loss rate was observed between the smooth and rough soil surfaces. Sediments from smooth soil surfaces were more depleted in clay-size particles, but more enriched in sand-size particles than those from rough soil surfaces, suggesting that erosion was less selective on smooth than on rough soil surfaces. The ratio of different sizes of transported sediment to the soil matrix indicates that most of the clay was eroded in the form of aggregates, silt-size particles were transported mainly as primary particles, and sand-size particles were predominantly aggregates of finer particles. Soil surface roughness has a crucial effect on the sediment size distribution and erosion processes. Significant differences of the enrichment ratios for the effective PSD and the ultimate PSD were observed under the two soil surface roughness treatments. These findings demonstrate that we should consider each particle size separately rather than use only the total sediment discharge in

  20. Surface preparation process of a uranium titanium alloy, in particular for chemical nickel plating

    International Nuclear Information System (INIS)

    Henri, A.; Lefevre, D.; Massicot, P.

    1987-01-01

    In this process the uranium alloy surface is attacked with a solution of lithium chloride and hydrochloric acid. Dissolved uranium can be recovered from the solution by an ion exchange resin. Treated alloy can be nickel plated by a chemical process [fr

  1. Fly's proprioception-inspired micromachined strain-sensing structure: idea, design, modeling and simulation, and comparison with experimental results

    Energy Technology Data Exchange (ETDEWEB)

    Wicaksono, D H B [Department of Microelectronics, Delft University of Technology, Mekelweg 4, Delft, Zuid-Holland 2628CD (Netherlands); Zhang, L-J [Department of Microelectronics, Delft University of Technology, Mekelweg 4, Delft, Zuid-Holland 2628CD (Netherlands); Pandraud, G [Department of Microelectronics, Delft University of Technology, Mekelweg 4, Delft, Zuid-Holland 2628CD (Netherlands); French, P J [Department of Microelectronics, Delft University of Technology, Mekelweg 4, Delft, Zuid-Holland 2628CD (Netherlands); Vincent, J F V [Department of Mech. Engineering, Bath University Bath, BA2 7AY (United Kingdom)

    2006-04-01

    A new strain-sensing structure inspired from insect's (especially the Fly) propricoception sensor is devised. The campaniform sensillum is a strain-sensing microstructure with very high sensitivity despite its small dimension (diameter {approx}10 {mu}m in a relatively stiff material of insect's exocuticle (E = {approx}10{sup 9} Pa). Previous work shows that the high sensitivity of this structure towards strain is due to its membrane-in-recess- and strainconcentrating-hole-features. Based on this inspiration, we built similar structure using silicon micromachining technology. Then a simple characterisation setup was devised. Here, we present briefly, finite-element modeling and simulation based on this actual sample preparation for the characterisation. As comparison and also to understand mechanical features responsible for the strain-sensitivity, we performed the modeling on different mechanical structures: bulk chunk, blind-hole, through-hole, surface membrane, and membrane-in-recess. The actual experimental characterisation was performed previously using optical technique to membrane in-recess micromachined Si structure. The FEM simulation results confirm that the bending stress and strain are concentrated in the hole-vicinity. The membrane inside the hole acts as displacement transducer. The FEM is in conformity with previous analytical results, as well as the optical characterisation result. The end goal is to build a new type MEMS strain sensor.

  2. Biocompatibility enhancement of rare earth magnesium alloy by laser surface processing

    Science.gov (United States)

    Nie, Shilin; Wang, Yuqing; Liu, Haifeng; Guan, Yingchun

    2018-01-01

    Although magnesium and magnesium alloys are considered biocompatible and biodegradable, insufficient biocompatibility in body fluid environment is still the major drawback of magnesium alloys for their successful applications as biodegradable orthopaedic implants. In this work, magnesium alloy surface with both enhanced corrosion resistance and better cell adhesion property was directly fabricated by laser surface processing. Laser surface melting was used to improve corrosion resistance of Mg-6Gd-0.6Ca alloy. After laser surface melting, laser surface texturing was utilized on melted surface for better cell adhesion property. The corrosion resistance of laser-treated and as-received samples were evaluated using electrochemical technique. The effect of laser surface treatment on phase and microstructure evolution was evaluated using scanning electron microscopy, optical microscopy and X-ray diffraction. This work investigated the effect of laser treatment on cell distribution across the surface of magnesium alloy substrates. Osteoblast was cultured on the laser-treated surface and as-received surface. Cell morphology was observed with a scanning electron microscopy, and cell viability was evaluated by optical density measurement.

  3. Surface modification on a glass surface with a combination technique of sol–gel and air brushing processes

    KAUST Repository

    Tsai, Meng-Yu

    2011-08-01

    This study fabricated the large area and optically transparent superhydrophobic silica based films on glass surface with optimized hardness. A silane coupling agent, tetraethoxysilane (TEOS), effectively bonds silica particles onto the glass substrate. Desired surface roughness was obtained by adjusting nano silica particles concentration of the precursors prepared by the sol-gel process. Silica suspension was coated onto the glass substrate by the air brushing methods. This method can deposit a uniform, transparent coating on the glass substrate efficiently. Diluting the precursor by adding ethanol or a mixture of D.I. water and ethanol further improved the transmittance and superhydrophobicity efficiency. The results showed that as the silica particle concentration and the thickness of the coating were increased, the surface roughness was enhanced. Rougher surface displayed a higher superhydrophobicity and lower transmittance. Therefore, the concentration of silica particle, volume of coatings, and the ratio of ethanol and D.I. water are of great importance to deposit a transparent, superhydrophobic coating on glass. © 2011 Elsevier B.V. All rights reserved.

  4. Effect of processing parameters of rotary ultrasonic machining on surface integrity of potassium dihydrogen phosphate crystals

    Directory of Open Access Journals (Sweden)

    Jianfu Zhang

    2015-09-01

    Full Text Available Potassium dihydrogen phosphate is an important optical crystal. However, high-precision processing of large potassium dihydrogen phosphate crystal workpieces is difficult. In this article, surface roughness and subsurface damage characteristics of a (001 potassium dihydrogen phosphate crystal surface produced by traditional and rotary ultrasonic machining are studied. The influence of process parameters, including spindle speed, feed speed, type and size of sintered diamond wheel, ultrasonic power, and selection of cutting fluid on potassium dihydrogen phosphate crystal surface integrity, was analyzed. The surface integrity, especially the subsurface damage depth, was affected significantly by the ultrasonic power. Metal-sintered diamond tools with high granularity were most suitable for machining potassium dihydrogen phosphate crystal. Cutting fluid played a key role in potassium dihydrogen phosphate crystal machining. A more precise surface can be obtained in machining with a higher spindle speed, lower feed speed, and using kerosene as cutting fluid. Based on the provided optimized process parameters for machining potassium dihydrogen phosphate crystal, a processed surface quality with Ra value of 33 nm and subsurface damage depth value of 6.38 μm was achieved.

  5. The synthesis of flexible zeolite nanofibers by a polymer surface thermal etching process

    Science.gov (United States)

    Ji, Sang Hyun; Cho, Jeong Ho; Jeong, Young Hun; Yun, Jon Do; Yun, Ji Sun

    2017-09-01

    Flexible zeolite nanofibers with high surface area were synthesized by an electrospinning method and a thermal surface partial etching process. The thermal surface partial etching temperature range for maintaining flexibility of zeolite nanofibers was investigated based on thermogravimetric analysis (TGA), and the as-spun zeolite nanofibers were thermal etched at a temperature range from 250 °C to 450 °C. Field emission scanning electron microscope (FE-SEM) and atomic force microscope (AFM) images clearly showed that the polymer surface of the nanofibers was partially etched, and zeolite particles were exposed on the surface of the nanofibers. X-ray diffraction (XRD) results confirmed that a phase change did not occur in the zeolite nanofibers with a thermal etching process. The specific surface area characteristics were analyzed by N2 adsorption/desorption isotherms, and the thermal surface etched zeolite nanofibers at 400 °C had a specific surface area of 816 m2/g similar to the value of zeolite powders.

  6. Impact of overall and particle surface heat transfer coefficients on thermal process optimization in rotary retorts.

    Science.gov (United States)

    Simpson, R; Abakarov, A; Almonacid, S; Teixeira, A

    2008-10-01

    This study attempts to examine the significance of recent research that has focused on efforts to estimate values for global and surface heat transfer coefficients under forced convection heating induced by end-over-end rotation in retorting of canned peas in brine. The study confirms the accuracy of regression analysis used to predict values for heat transfer coefficients as a function of rotating speed and headspace, and uses them to predict values over a range of process conditions, which make up the search domain for process optimization. These coefficients were used in a convective heat transfer model to establish a range of lethality-equivalent retort temperature-time processes for various conditions of retort temperature, rotating speed, and headspace. Then, they were coupled with quality factor kinetics to predict the final volume average and surface quality retention resulting from each process and to find the optimal thermal process conditions for canned fresh green peas. Results showed that maximum quality retention (surface and volume average retention) was achieved with the shortest possible process time (made possible with highest retort temperature), and reached the similar level in all cases with small difference between surface and volume average quality retention. The highest heat transfer coefficients (associated with maximum rotating speed and headspace) showed a 10% reduction in process time over that required with minimum rotating speed and headspace. The study concludes with a discussion of the significance of these findings and degree to which they were expected.

  7. A Coupled Groundwater-Surface Water Modeling Framework for Simulating Transition Zone Processes.

    Science.gov (United States)

    Mugunthan, Pradeep; Russell, Kevin T; Gong, Binglei; Riley, Michael J; Chin, Arthur; McDonald, Blair G; Eastcott, Linda J

    2017-05-01

    There is an identified need for fully representing groundwater-surface water transition zone (i.e., the sediment zone that connects groundwater and surface water) processes in modeling fate and transport of contaminants to assist with management of contaminated sediments. Most existing groundwater and surface water fate and transport models are not dynamically linked and do not consider transition zone processes such as bioturbation and deposition and erosion of sediments. An interface module is developed herein to holistically simulate the fate and transport by coupling two commonly used models, Environmental Fluid Dynamics Code (EFDC) and SEAWAT, to simulate surface water and groundwater hydrodynamics, while providing an enhanced representation of the processes in the transition zone. Transition zone and surface water contaminant processes were represented through an enhanced version of the EFDC model, AQFATE. AQFATE also includes SEDZLJ, a state-of-the-science surface water sediment transport model. The modeling framework was tested on a published test problem and applied to evaluate field-scale two- and three-dimensional contaminant transport. The model accurately simulated concentrations of salinity from a published test case. For the field-scale applications, the model showed excellent mass balance closure for the transition zone and provided accurate simulations of all transition zone processes represented in the modeling framework. The model predictions for the two-dimensional field case were consistent with site-specific observations of contaminant migration. This modeling framework represents advancement in the simulation of transition zone processes and can help inform risk assessment at sites where contaminant sources from upland areas have the potential to impact sediments and surface water. © 2016, National Ground Water Association.

  8. Distribution and Characteristics of Boulder Halos at High Latitudes on Mars: Ground Ice and Surface Processes Drive Surface Reworking

    Science.gov (United States)

    Levy, J. S.; Fassett, C. I.; Rader, L. X.; King, I. R.; Chaffey, P. M.; Wagoner, C. M.; Hanlon, A. E.; Watters, J. L.; Kreslavsky, M. A.; Holt, J. W.; Russell, A. T.; Dyar, M. D.

    2018-02-01

    Boulder halos are circular arrangements of clasts present at Martian middle to high latitudes. Boulder halos are thought to result from impacts into a boulder-poor surficial unit that is rich in ground ice and/or sediments and that is underlain by a competent substrate. In this model, boulders are excavated by impacts and remain at the surface as the crater degrades. To determine the distribution of boulder halos and to evaluate mechanisms for their formation, we searched for boulder halos over 4,188 High Resolution Imaging Science Experiment images located between 50-80° north and 50-80° south latitude. We evaluate geological and climatological parameters at halo sites. Boulder halos are about three times more common in the northern hemisphere than in the southern hemisphere (19% versus 6% of images) and have size-frequency distributions suggesting recent Amazonian formation (tens to hundreds of millions of years). In the north, boulder halo sites are characterized by abundant shallow subsurface ice and high thermal inertia. Spatial patterns of halo distribution indicate that excavation of boulders from beneath nonboulder-bearing substrates is necessary for the formation of boulder halos, but that alone is not sufficient. Rather, surface processes either promote boulder halo preservation in the north or destroy boulder halos in the south. Notably, boulder halos predate the most recent period of near-surface ice emplacement on Mars and persist at the surface atop mobile regolith. The lifetime of observed boulders at the Martian surface is greater than the lifetime of the craters that excavated them. Finally, larger minimum boulder halo sizes in the north indicate thicker icy soil layers on average throughout climate variations driven by spin/orbit changes during the last tens to hundreds of millions of years.

  9. Method for atmospheric pressure reactive atom plasma processing for surface modification

    Science.gov (United States)

    Carr, Jeffrey W [Livermore, CA

    2009-09-22

    Reactive atom plasma processing can be used to shape, polish, planarize and clean the surfaces of difficult materials with minimal subsurface damage. The apparatus and methods use a plasma torch, such as a conventional ICP torch. The workpiece and plasma torch are moved with respect to each other, whether by translating and/or rotating the workpiece, the plasma, or both. The plasma discharge from the torch can be used to shape, planarize, polish, and/or clean the surface of the workpiece, as well as to thin the workpiece. The processing may cause minimal or no damage to the workpiece underneath the surface, and may involve removing material from the surface of the workpiece.

  10. Modelling Periglacial Processes on Low-Relief High-Elevation Surfaces

    DEFF Research Database (Denmark)

    Andersen, Jane Lund; Knudsen, Mads Faurschou; Egholm, D.L.

    Are low-relief high-elevation surfaces generally a result of uplift of flat surfaces formed close to sea-level or can they be formed "in situ" by climate dependent surface processes such as those associated with glaciation? This question is important to resolve in order to understand the geological...... as a function of mean annual air temperature and sediment thickness. This allows us to incorporate periglacial processes into a long-term landscape evolution model where surface elevation, sediment thickness, and climate evolve over time. With this model we are able to explore the slow feedbacks between...... periglacial erosion, sediment transport, and the evolving topography. We show that smooth peaks, convex hillslopes, and a few meters thick regolith cover at high elevation are emergent properties of the landscape evolution model. By varying climate and other model parameters, we discuss how the landscape...

  11. The study of sub-surface damage distributions during grinding process on different abrasion materials

    Science.gov (United States)

    Kuo, Ching-Hsiang; Huang, Chien-Yao; Yu, Zong-Ru; Shu, Shyu-Cheng; Chang, Keng-Shou; Hsu, Wei-Yao

    2017-10-01

    The grinding process is the primary technology for curvature generation (CG) on glass optics. The higher material removal rate (MRR) leads to deeper sub-surface damage (SSD) on lens surface. The SSD must be removed by following lapping and polishing processes to ensure the lens quality. However, these are not an easy and an efficient process to remove the SSD from ground surface directly for aspheric surfaces with tens or hundreds microns departure from bestfit- sphere (BFS). An efficient fabrication procedure for large aspheric departure on glass materials must be considered. We propose 3-step fabrication procedures for aspheric surface with larger departure. 1st step is to generate a specific aspheric surface with depth less than 10 μm of SSD residual. 2nd step is to remove SSD and keep the aspheric form by using Zeeko polisher with higher MRR pad. Final step is to figure and finish the aspheric surface by using QED MRF machine. In this study, we focus on the 1st step to investigate the residual depth of SSD after grinding process on different abrasion materials. The materials of tested part are fused silica, S-NPH2, and S-PHM52. The cross grinding would be configured and depth of SSD/surface roughness would be evaluated in this study. The characteristic of SSD could be observed after etching by confocal microscope. The experimental results show the depth of SSD below 31.1 μm with #400 grinding wheel. And the near 10 μm depth of SSD would be achieved with #1,000 grinding wheel. It means the aspherization polishing on large parts with large departure from best fit sphere would be replaced. The fabrication of large aspheric part would be efficient.

  12. Surface Processing and Modification of Polymers by Water Cluster Ion Beam

    Science.gov (United States)

    Ryuto, H.; Takeuchi, M.; Ichihashi, G.; Sommani, P.; Takaoka, G. H.

    2011-01-01

    A water cluster ion beam was irradiated on a poly(methyl methacrylate) (PMMA) surface to examine the possibility of applying the water cluster ion beam technique to the surface processing and modification of polymers. The sputtering yields of PMMA substrates irradiated with water cluster ion beams increased with acceleration voltage and dose of the water cluster ion beam. The threshold acceleration voltage of sputtering was approximately 3 kV. The X-ray photoelectron spectroscopy (XPS) analysis of the PMMA surface irradiated with the water cluster ion beam suggested the degradation of the PMMA side chains. The XPS spectrum of the surface of the sputtered particle catcher at 45° backward direction showed approximately the same shape as the XPS spectrum of the PMMA surface irradiated with the water cluster ion beam.

  13. Effect of Build Angle on Surface Properties of Nickel Superalloys Processed by Selective Laser Melting

    Science.gov (United States)

    Covarrubias, Ernesto E.; Eshraghi, Mohsen

    2017-12-01

    Aerospace, automotive, and medical industries use selective laser melting (SLM) to produce complex parts through solidifying successive layers of powder. This additive manufacturing technique has many advantages, but one of the biggest challenges facing this process is the resulting surface quality of the as-built parts. The purpose of this research was to study the surface properties of Inconel 718 alloys fabricated by SLM. The effect of build angle on the surface properties of as-built parts was investigated. Two sets of sample geometries including cube and rectangular artifacts were considered in the study. It was found that, for angles between 15° and 75°, theoretical calculations based on the "stair-step" effect were consistent with the experimental results. Downskin surfaces showed higher average roughness values compared to the upskin surfaces. No significant difference was found between the average roughness values measured from cube and rectangular test artifacts.

  14. Influence of Wire Electrical Discharge Machining (WEDM) process parameters on surface roughness

    Science.gov (United States)

    Yeakub Ali, Mohammad; Banu, Asfana; Abu Bakar, Mazilah

    2018-01-01

    In obtaining the best quality of engineering components, the quality of machined parts surface plays an important role. It improves the fatigue strength, wear resistance, and corrosion of workpiece. This paper investigates the effects of wire electrical discharge machining (WEDM) process parameters on surface roughness of stainless steel using distilled water as dielectric fluid and brass wire as tool electrode. The parameters selected are voltage open, wire speed, wire tension, voltage gap, and off time. Empirical model was developed for the estimation of surface roughness. The analysis revealed that off time has a major influence on surface roughness. The optimum machining parameters for minimum surface roughness were found to be at a 10 V open voltage, 2.84 μs off time, 12 m/min wire speed, 6.3 N wire tension, and 54.91 V voltage gap.

  15. Effect of Build Angle on Surface Properties of Nickel Superalloys Processed by Selective Laser Melting

    Science.gov (United States)

    Covarrubias, Ernesto E.; Eshraghi, Mohsen

    2018-03-01

    Aerospace, automotive, and medical industries use selective laser melting (SLM) to produce complex parts through solidifying successive layers of powder. This additive manufacturing technique has many advantages, but one of the biggest challenges facing this process is the resulting surface quality of the as-built parts. The purpose of this research was to study the surface properties of Inconel 718 alloys fabricated by SLM. The effect of build angle on the surface properties of as-built parts was investigated. Two sets of sample geometries including cube and rectangular artifacts were considered in the study. It was found that, for angles between 15° and 75°, theoretical calculations based on the "stair-step" effect were consistent with the experimental results. Downskin surfaces showed higher average roughness values compared to the upskin surfaces. No significant difference was found between the average roughness values measured from cube and rectangular test artifacts.

  16. Evaporation phase change processes of water/methanol mixtures on superhydrophobic nanostructured surfaces

    Science.gov (United States)

    Chiang, Cheng-Kun; Lu, Yen-Wen

    2011-07-01

    Evaporation phenomena are a critical and frequently seen phase change process in many heat transfer applications. In this paper, we study the evaporation process of a sessile droplet on two topologically different surfaces, including smooth and nanostructured surfaces. The nanostructured surface has an array of high-aspect-ratio nanowires (height/diameter ~ 125) and is implemented by using a simple template-based nanofabrication method. It possesses superhydrophobicity (>140°) and low contact angle hysteresis (1.2-2.1°), allowing the liquid droplets to remain in the 'fakir' state throughout the evaporation processes. Sessile droplets of deionized (DI) water and water/methanol binary mixture test liquids with their contact angles and base diameters are monitored. The results show that the nanostructures play a critical role in the droplet dynamics during evaporation.

  17. Evaporation phase change processes of water/methanol mixtures on superhydrophobic nanostructured surfaces

    International Nuclear Information System (INIS)

    Chiang, Cheng-Kun; Lu, Yen-Wen

    2011-01-01

    Evaporation phenomena are a critical and frequently seen phase change process in many heat transfer applications. In this paper, we study the evaporation process of a sessile droplet on two topologically different surfaces, including smooth and nanostructured surfaces. The nanostructured surface has an array of high-aspect-ratio nanowires (height/diameter ∼ 125) and is implemented by using a simple template-based nanofabrication method. It possesses superhydrophobicity (>140°) and low contact angle hysteresis (1.2–2.1°), allowing the liquid droplets to remain in the 'fakir' state throughout the evaporation processes. Sessile droplets of deionized (DI) water and water/methanol binary mixture test liquids with their contact angles and base diameters are monitored. The results show that the nanostructures play a critical role in the droplet dynamics during evaporation

  18. Modeling and optimization of surface roughness in single point incremental forming process

    Directory of Open Access Journals (Sweden)

    Suresh Kurra

    2015-07-01

    Full Text Available Single point incremental forming (SPIF is a novel and potential process for sheet metal prototyping and low volume production applications. This article is focuses on the development of predictive models for surface roughness estimation in SPIF process. Surface roughness in SPIF has been modeled using three different techniques namely, Artificial Neural Networks (ANN, Support Vector Regression (SVR and Genetic Programming (GP. In the development of these predictive models, tool diameter, step depth, wall angle, feed rate and lubricant type have been considered as model variables. Arithmetic mean surface roughness (Ra and maximum peak to valley height (Rz are used as response variables to assess the surface roughness of incrementally formed parts. The data required to generate, compare and evaluate the proposed models have been obtained from SPIF experiments performed on Computer Numerical Control (CNC milling machine using Box–Behnken design. The developed models are having satisfactory goodness of fit in predicting the surface roughness. Further, the GP model has been used for optimization of Ra and Rz using genetic algorithm. The optimum process parameters for minimum surface roughness in SPIF have been obtained and validated with the experiments and found highly satisfactory results within 10% error.

  19. Bioinspired superhydrophobic surfaces, fabricated through simple and scalable roll-to-roll processing

    Science.gov (United States)

    Park, Sung-Hoon; Lee, Sangeui; Moreira, David; Bandaru, Prabhakar R.; Han, Intaek; Yun, Dong-Jin

    2015-10-01

    A simple, scalable, non-lithographic, technique for fabricating durable superhydrophobic (SH) surfaces, based on the fingering instabilities associated with non-Newtonian flow and shear tearing, has been developed. The high viscosity of the nanotube/elastomer paste has been exploited for the fabrication. The fabricated SH surfaces had the appearance of bristled shark skin and were robust with respect to mechanical forces. While flow instability is regarded as adverse to roll-coating processes for fabricating uniform films, we especially use the effect to create the SH surface. Along with their durability and self-cleaning capabilities, we have demonstrated drag reduction effects of the fabricated films through dynamic flow measurements.

  20. Selection Criteria and Methods for Testing Different Surface Materials for Contact Frying Processes

    DEFF Research Database (Denmark)

    Ashokkumar, Saranya

    these coatings are not mechanically stable, they do not tolerate high enough temperatures (above 260⁰ C) to give the right product quality, and the surfaces wear easily calling for regular service of the equipment. The present project concerns an investigation of the possibilities of replacing the widely used......Inner surfaces of industrial process equipment for food are often coated to give the surfaces particular properties with respect to adhesion and cleanability. Existing coating materials (PTFE (Teflon®) or silicone based polymers) suffer from drawbacks when used in contact frying, because...

  1. Bioinspired superhydrophobic surfaces, fabricated through simple and scalable roll-to-roll processing.

    Science.gov (United States)

    Park, Sung-Hoon; Lee, Sangeui; Moreira, David; Bandaru, Prabhakar R; Han, InTaek; Yun, Dong-Jin

    2015-10-22

    A simple, scalable, non-lithographic, technique for fabricating durable superhydrophobic (SH) surfaces, based on the fingering instabilities associated with non-Newtonian flow and shear tearing, has been developed. The high viscosity of the nanotube/elastomer paste has been exploited for the fabrication. The fabricated SH surfaces had the appearance of bristled shark skin and were robust with respect to mechanical forces. While flow instability is regarded as adverse to roll-coating processes for fabricating uniform films, we especially use the effect to create the SH surface. Along with their durability and self-cleaning capabilities, we have demonstrated drag reduction effects of the fabricated films through dynamic flow measurements.

  2. Gliding arc surface modification of carrot nanofibre coating - perspective for composite processing

    DEFF Research Database (Denmark)

    Kusano, Yukihiro; Berglund, L; Aitomäki, Y

    2016-01-01

    Surfaces of carrot nanofibre coatings were modified by a gliding arc in atmospheric pressure air. The treatment strengthened wetting of deionized water and glycerol, increased an oxygen content, C-O and C=O, and moderately roughened the surfaces. In the perspective of composite materials......, these changes to the nanofibres can potentially improve their processability when they are to be impregnated with a polymeric matrix. However, longer exposure to the gliding arc reduced oxidation and roughness of the surface, and thus there exists an optimum condition to achieve good wetting to solvents....

  3. Planarization of the diamond film surface by using the hydrogen plasma etching with carbon diffusion process

    International Nuclear Information System (INIS)

    Kim, Sung Hoon

    2001-01-01

    Planarization of the free-standing diamond film surface as smooth as possible could be obtained by using the hydrogen plasma etching with the diffusion of the carbon species into the metal alloy (Fe, Cr, Ni). For this process, we placed the free-standing diamond film between the metal alloy and the Mo substrate like a metal-diamond-molybdenum (MDM) sandwich. We set the sandwich-type MDM in a microwave-plasma-enhanced chemical vapor deposition (MPECVD) system. The sandwich-type MDM was heated over ca. 1000 .deg. C by using the hydrogen plasma. We call this process as the hydrogen plasma etching with carbon diffusion process. After etching the free-standing diamond film surface, we investigated surface roughness, morphologies, and the incorporated impurities on the etched diamond film surface. Finally, we suggest that the hydrogen plasma etching with carbon diffusion process is an adequate etching technique for the fabrication of the diamond film surface applicable to electronic devices

  4. Fabrication of Super Hydrophobic Surfaces by fs Laser Pulses : How to Produce Self-Cleaning Surfaces

    NARCIS (Netherlands)

    Groenendijk, M.N.W.

    2008-01-01

    The chair of Applied Laser Technology of the University of Twente, The Netherlands, is performing research into applications of ultrashort pulsed lasers for micromachining. In a recent project, PhD student Max Groenendijk developed a method for the production of super water repellant surfaces by

  5. Microstructure and optical appearance of anodized friction stir processed Al - Metal oxide surface composites

    DEFF Research Database (Denmark)

    Gudla, Visweswara Chakravarthy; Jensen, Flemming; Bordo, Kirill

    2014-01-01

    Multiple-pass friction stir processing (FSP) was employed to impregnate Ti, Y and Ce oxide powders into the surface of an Aluminium alloy. The FSP processed surface composite was subsequently anodized with an aim to develop optical effects in the anodized layer owing to the presence of incorporated...... oxide particles which will influence the scattering of light. This paper presents the investigations on relation between microstructure of the FSP zone and optical appearance of the anodized layer due to incorporation of metal oxide particles and modification of the oxide particles due to the anodizing...

  6. Turning process monitoring of internal combustion engine piston’s cylindrical surface

    Directory of Open Access Journals (Sweden)

    Twardowski Pawel

    2017-01-01

    Full Text Available In this paper the monitoring method of turning process of combustion engine piston’s cylindrical surface is proposed. During this process, the PCD diamond tool cuts the piston’s cylindrical surface with the 3 grooves. The first groove is made in the cast iron insert. In case, when the machining allowances are selected inappropriately, the tool cuts the cast iron insert and consequently generates the reject. The proposed monitoring system based on vibration signals analysis enables the detection of these critical situations and react, in order to maintain the production quality.

  7. Analysis of the Forming Process of Conical-Like Helical Surfaces with Roller Tools

    Directory of Open Access Journals (Sweden)

    Kacalak W.

    2017-02-01

    Full Text Available The article presents a methodology of an analysis and modeling of technological systems and the grinding process of conical-like helical surfaces with the use of modern CAD/CAE systems and calculations in the Matlab system. The methodology developed allows one to carry out simulation tests for the accuracy of the grinding process of helical surfaces taking into consideration the deviations of the location and shape of the system’s elements, axial and radial striking the spindle of the workpiece machined and the grinding wheel as well as the tool’s geometrical features.

  8. Development of micro capacitive accelerometer for subsurface microseismic measurement; Micromachining ni yoru chika danseiha kenshutsu no tame no silicon yoryogata kasokudo sensor no seisaku

    Energy Technology Data Exchange (ETDEWEB)

    Nishizawa, M.; Niitsuma, H.; Esashi, M. [Tohoku University, Sendai (Japan). Faculty of Engineering

    1997-05-27

    A silicon capacitive accelerometer was fabricated to detect subsurface elastic waves by using micromachining technology. Characteristics required for it call for capability of detecting acceleration with amplitudes from 0.1 to 1 gal and flat amplitude characteristics in frequency bands of 10 Hz to several kHz. For the purpose of measuring transition phenomena, linear phase characteristics in the required bands must be guaranteed, cross sensitivity must be small, and resistance to water, pressure and heat is demanded. Sensitivity of the sensor is determined finally by noise level in a detection circuit. The sensor`s minimum detection capability was 40 mgal in the case of the distance between a weight and an electrode being 3 {mu}m. This specification value is a value realizable by the current micromachining technology. Dimensions for the weight and other members were decided with the natural frequency to make band width 2 kHz set to 4 kHz. Completion of the product has not been achieved yet, however, because of a problem that the weight gets stuck on the electrode plate in anode bonding in the assembly process. 7 refs., 5 figs., 1 tab.

  9. Uniformity analysis of dielectric barrier discharge (DBD) processed polyethylene terephthalate (PET) surface

    Science.gov (United States)

    Liu, Chaozong; Brown, Norman M. D.; Meenan, Brian J.

    2006-01-01

    A dielectric barrier discharge (DBD) plasma, operating in air at atmospheric pressure, has been used to induce changes in the surface properties of polyethylene terephthalate (PET) films. The effects that the key DBD operating parameters: discharge power, processing speed, processing duration, and electrode configurations, have on producing wettability changes in the PET surface region have been investigated. The approach taken involves the application of an Taguchi experimental design and robust analysis methodology. The various data sets obtained from these analyses have been used to studies the effect of the operating parameters on the surface uniformity and efficiency of the said treatment. In general, the results obtained indicate that DBD plasma processing is an effective method for the controlled surface modification of PET. Relatively short exposures to the atmospheric pressure discharge produces significant wettability changes at the polymer film surface, as indicted by pronounced reductions in the water contact angle measured. It was observed that the wettability of the resultant surface shows no significant differences in respect to orientation parallel (L-direction) or perpendicular (T-direction) to the electrode long axis. However, there was significant differences between the data obtained from these two orientations. Analysis of the role of each of the operating parameters concerned shows that they have a selective effectiveness with respect to resultant surface modification in terms of uniformity of modification and wettability. The number of treatment cycles and the electrode configuration used were found to have the most significant effects on the homogeneity of the resultant PET surface changes in L- and T-orientation, respectively. On the other hand, the applied power showed no significant role in this regard. The number of treatment cycles was found to be the dominant factor (at significance level of 0.05) in respect of water contact angle

  10. Melt expulsion during ultrasonic vibration-assisted laser surface processing of austenitic stainless steel.

    Science.gov (United States)

    Alavi, S Habib; Harimkar, Sandip P

    2015-05-01

    Simultaneous application of ultrasonic vibrations during conventional materials processing (casting, welding) and material removal processes (machining) has recently been gaining widespread attention due to improvement in metallurgical quality and efficient material removal, respectively. In this paper, ultrasonic vibration-assisted laser surface melting of austenitic stainless steel (AISI 316) is reported. While the application of ultrasonic vibrations during laser processing delays the laser interaction with material due to enhancement of surface convection, it resulted in expulsion of melt from the irradiated region (forming craters) and transition from columnar to equiaxed dendritic grain structure in the resolidified melt films. Systematic investigations on the effect of ultrasonic vibrations (with vibrations frequency of 20 kHz and power output in the range of 20-40%) on the development of microstructure during laser surface melting (with laser power of 900 W and irradiation time in the range of 0.30-0.45 s) are reported. The results indicate that the proposed ultrasonic vibration-assisted laser processing can be designed for efficient material removal (laser machining) and improved equiaxed microstructure (laser surface modifications) during materials processing. Copyright © 2015 Elsevier B.V. All rights reserved.

  11. Investigation of electrical characteristics of no-insulation coil wound with surface-processed HTS tape

    Science.gov (United States)

    Jeon, Haeryong; Lee, Woo Seung; Kim, Jinsub; Baek, Geonwoo; Jeon, Sangsu; Yoon, Yong Soo; Ko, Tae Kuk

    2017-08-01

    This paper deals with the electrical characteristics of no-insulation coil wound with surface-processed HTS tape. The bypassing current path through turn-to-turn contacts within a coil is formed in the no-insulation coil, and this bypassing current path determines two characteristics: 1) self-protection and 2) charge-discharge delay. The amplitude of bypassing current is determined by contact resistance between the turn-to-turn contacts of the no-insulation coil. The surface roughness of the HTS tape is one of the parameters to change the contact resistance. The HTS tapes were processed to roughen by bead blast and abrasive paper, and the no-insulation coil is fabricated using processed HTS tape. We have studied the charge-discharge delay and self-protecting characteristic of each no-insulation coil by 1) sudden discharge tests and 2) overcurrent tests. The FEM simulations of contact resistance of no-insulation coil were carried out. The contact surface resistance of a case processed by abrasive paper has almost three times larger than that of reference no-insulation coil, and a case processed by bead blast presents almost same contact surface resistance with reference no-insulation coil.

  12. Characterization of boron carbide particulate reinforced in situ copper surface composites synthesized using friction stir processing

    Energy Technology Data Exchange (ETDEWEB)

    Sathiskumar, R., E-mail: sathiscit2011@gmail.com [Department of Mechanical Engineering, Coimbatore Institute of Technology, Coimbatore, 641 014 Tamil Nadu (India); Murugan, N., E-mail: murugan@cit.edu.in [Department of Mechanical Engineering, Coimbatore Institute of Technology, Coimbatore, 641 014 Tamil Nadu (India); Dinaharan, I., E-mail: dinaweld2009@gmail.com [Department of Mechanical Engineering, V V College of Engineering, Tisaiyanvilai, 627 657 Tamil Nadu (India); Vijay, S.J., E-mail: vijayjoseph@karunya.edu [Centre for Research in Metallurgy (CRM), School of Mechanical Sciences, Karunya University, Coimbatore, 641 114 Tamil Nadu (India)

    2013-10-15

    Friction stir processing has evolved as a novel solid state technique to fabricate surface composites. The objective of this work is to apply the friction stir processing technique to fabricate boron carbide particulate reinforced copper surface composites and investigate the effect of B{sub 4}C particles and its volume fraction on microstructure and sliding wear behavior of the same. A groove was prepared on 6 mm thick copper plates and packed with B{sub 4}C particles. The dimensions of the groove was varied to result in five different volume fractions of B{sub 4}C particles (0, 6, 12, 18 and 24 vol.%). A single pass friction stir processing was done using a tool rotational speed of 1000 rpm, travel speed of 40 mm/min and an axial force of 10 kN. Metallurgical characterization of the Cu/B{sub 4}C surface composites was carried out using optical microscope and scanning electron microscope. The sliding wear behavior was evaluated using a pin-on-disk apparatus. Results indicated that the B{sub 4}C particles significantly influenced the area, dispersion, grain size, microhardness and sliding wear behavior of the Cu/B{sub 4}C surface composites. When the volume fraction of B{sub 4}C was increased, the wear mode changed from microcutting to abrasive wear and wear debris was found to be finer. Highlights: • Fabrication of Cu/B{sub 4}C surface composite by friction stir processing • Analyzing the effect of B{sub 4}C particles on the properties of Cu/B4C surface composite • Increased volume fraction of B{sub 4}C particles reduced the area of surface composite. • Increased volume fraction of B{sub 4}C particles enhanced the microhardness and wear rate. • B{sub 4}C particles altered the wear mode from microcutting to abrasive.

  13. Optimized design of micromachined electric field mills to maximize electrostatic field sensitivity

    Directory of Open Access Journals (Sweden)

    Yu Zhou

    2016-07-01

    Full Text Available This paper describes the design optimization of a micromachined electric field mill, in relation to maximizing its output signal. The cases studied are for a perforated electrically grounded shutter vibrating laterally over sensing electrodes. It is shown that when modeling the output signal of the sensor, the differential charge on the sense electrodes when exposed to vs. visibly shielded from the incident electric field must be considered. Parametric studies of device dimensions show that the shutter thickness and its spacing from the underlying electrodes should be minimized as these parameters very strongly affect the MEFM signal. Exploration of the shutter perforation size and sense electrode width indicate that the best MEFM design is one where shutter perforation widths are a few times larger than the sense electrode widths. Keywords: MEFM, Finite element method, Electric field measurement, MEMS, Micromachining

  14. Radar signal pre-processing to suppress surface bounce and multipath

    Science.gov (United States)

    Paglieroni, David W; Mast, Jeffrey E; Beer, N. Reginald

    2013-12-31

    A method and system for detecting the presence of subsurface objects within a medium is provided. In some embodiments, the imaging and detection system operates in a multistatic mode to collect radar return signals generated by an array of transceiver antenna pairs that is positioned across the surface and that travels down the surface. The imaging and detection system pre-processes that return signal to suppress certain undesirable effects. The imaging and detection system then generates synthetic aperture radar images from real aperture radar images generated from the pre-processed return signal. The imaging and detection system then post-processes the synthetic aperture radar images to improve detection of subsurface objects. The imaging and detection system identifies peaks in the energy levels of the post-processed image frame, which indicates the presence of a subsurface object.

  15. The Investigations of Friction under Die Surface Vibration in Cold Forging Process

    DEFF Research Database (Denmark)

    Jinming, Sha

    of the application of ultrasonic vibration on drawing, rolling and other metal forming process show that the load and friction coefficient would be decreased with the presence of ultrasonic vibration. Investigations on forging processes and under low frequency, especially the quantitative analysis of friction......The objective of this thesis is to fundamentally study the influence of die surface vibration on friction under low frequency in metal forging processes. The research includes vibrating tool system design for metal forming, theoretical and experimental investigations, and finite element simulations...... on die surface vibration in forging process. After a general introduction to friction mechanisms and friction test techniques in metal forming, the application of ultrasonic vibration in metal forming, the influence of sliding velocity on friction is described. Some earlier investigations...

  16. Process optimization of rolling for zincked sheet technology using response surface methodology and genetic algorithm

    Science.gov (United States)

    Ji, Liang-Bo; Chen, Fang

    2017-07-01

    Numerical simulation and intelligent optimization technology were adopted for rolling and extrusion of zincked sheet. By response surface methodology (RSM), genetic algorithm (GA) and data processing technology, an efficient optimization of process parameters for rolling of zincked sheet was investigated. The influence trend of roller gap, rolling speed and friction factor effects on reduction rate and plate shortening rate were analyzed firstly. Then a predictive response surface model for comprehensive quality index of part was created using RSM. Simulated and predicted values were compared. Through genetic algorithm method, the optimal process parameters for the forming of rolling were solved. They were verified and the optimum process parameters of rolling were obtained. It is feasible and effective.

  17. Dual brush process for selective surface modification in graphoepitaxy directed self-assembly

    Science.gov (United States)

    Doise, Jan; Chan, Boon Teik; Hori, Masafumi; Gronheid, Roel

    2017-07-01

    Graphoepitaxy directed self-assembly is a potential low-cost solution for patterning via layers with pitches beyond the reach of a single optical lithographic exposure. In this process, selective control of the interfacial energy at the bottom and sidewall of the template is an important but challenging exercise. A dual brush process is implemented, in which two brushes with distinct end-groups are consecutively grafted to the prepattern to achieve fully independent modification of the bottom and sidewall surface of the template. A comprehensive study of hole pattern quality shows that using a dual brush process leads to a substantial improvement in terms of positional and dimensional variability across the process window. These findings will be useful to others who wish to manipulate polymer-surface interactions in directed self-assembly flows.

  18. Interactive Computing and Processing of NASA Land Surface Observations Using Google Earth Engine

    Science.gov (United States)

    Molthan, Andrew; Burks, Jason; Bell, Jordan

    2016-01-01

    Google's Earth Engine offers a "big data" approach to processing large volumes of NASA and other remote sensing products. h\\ps://earthengine.google.com/ Interfaces include a Javascript or Python-based API, useful for accessing and processing over large periods of record for Landsat and MODIS observations. Other data sets are frequently added, including weather and climate model data sets, etc. Demonstrations here focus on exploratory efforts to perform land surface change detection related to severe weather, and other disaster events.

  19. Making waves: Kinetic processes controlling surface evolution during low energy ion sputtering

    International Nuclear Information System (INIS)

    Chan, W.L.; Chason, Eric

    2007-01-01

    When collimated beams of low energy ions are used to bombard materials, the surface often develops a periodic pattern or ''ripple'' structure. Different types of patterns are observed to develop under different conditions, with characteristic features that depend on the substrate material, the ion beam parameters, and the processing conditions. Because the patterns develop spontaneously, without applying any external mask or template, their formation is the expression of a dynamic balance among fundamental surface kinetic processes, e.g., erosion of material from the surface, ion-induced defect creation, and defect-mediated evolution of the surface morphology. In recent years, a comprehensive picture of the different kinetic mechanisms that control the different types of patterns that form has begun to emerge. In this article, we provide a review of different mechanisms that have been proposed and how they fit together in terms of the kinetic regimes in which they dominate. These are grouped into regions of behavior dominated by the directionality of the ion beam, the crystallinity of the surface, the barriers to surface roughening, and nonlinear effects. In sections devoted to each type of behavior, we relate experimental observations of patterning in these regimes to predictions of continuum models and to computer simulations. A comparison between theory and experiment is used to highlight strengths and weaknesses in our understanding. We also discuss the patterning behavior that falls outside the scope of the current understanding and opportunities for advancement

  20. Identification of soil erosion land surfaces by Landsat data analysis and processing

    International Nuclear Information System (INIS)

    Lo Curzio, S.

    2009-01-01

    In this paper, we outline the typical relationship between the spectral reflectance of aileron's on newly-formed land surfaces and the geo morphological features of the land surfaces at issue. These latter represent the products of superficial erosional processes due to the action of the gravity and/or water; thus, such land surfaces are highly representative of the strong soil degradation occurring in a wide area located on the boundary between Molise and Puglia regions (Southern Italy). The results of this study have been reported on thematic maps; on such maps, the detected erosional land surfaces have been mapped on the basis of their typical spectral signature. The study has been performed using Landsat satellite imagery data which have been then validated by means of field survey data. The satellite data have been processed using remote sensing techniques, such as: false colour composite, contrast stretching, principal component analysis and decorrelation stretching. The study has permitted to produce, in a relatively short time and at low expense, a map of the eroded land surfaces. Such a result represents a first and fundamental step in evaluating and monitoring the erosional processes in the study area [it

  1. Femtosecond laser micro-machined polyimide films for cell scaffold applications.

    Science.gov (United States)

    Antanavičiūtė, Ieva; Šimatonis, Linas; Ulčinas, Orestas; Gadeikytė, Aušra; Abakevičienė, Brigita; Tamulevičius, Sigitas; Mikalayeva, Valeryia; Skeberdis, Vytenis Arvydas; Stankevičius, Edgaras; Tamulevičius, Tomas

    2018-02-01

    Engineering of sophisticated synthetic 3D scaffolds that allow controlling behaviour and location of the cells requires advanced micro/nano-fabrication techniques. Ultrafast laser micro-machining employing a 1030-nm wavelength Yb:KGW femtosecond laser and a micro-fabrication workstation for micro-machining of commercially available 12.7 and 25.4 μm thickness polyimide (PI) film was applied. Mechanical properties of the fabricated scaffolds, i.e. arrays of differently spaced holes, were examined via custom-built uniaxial micro-tensile testing and finite element method simulations. We demonstrate that experimental micro-tensile testing results could be numerically simulated and explained by two-material model, assuming that 2-6 μm width rings around the holes possessed up to five times higher Young's modulus and yield stress compared with the rest of the laser intacted PI film areas of 'dog-bone'-shaped specimens. That was attributed to material modification around the micro-machined holes in the vicinity of the position of the focused laser beam track during trepanning drilling. We demonstrate that virgin PI films provide a suitable environment for the mobility, proliferation and intercellular communication of human bone marrow mesenchymal stem cells, and discuss how cell behaviour varies on the micro-machined PI films with holes of different diameters (3.1, 8.4 and 16.7 μm) and hole spacing (30, 35, 40 and 45 μm). We conclude that the holes of 3.1 μm diameter were sufficient for metabolic and genetic communication through membranous tunneling tubes between cells residing on the opposite sides of PI film, but prevented the trans-migration of cells through the holes. Copyright © 2016 John Wiley & Sons, Ltd. Copyright © 2016 John Wiley & Sons, Ltd.

  2. Optimized design of micromachined electric field mills to maximize electrostatic field sensitivity

    OpenAIRE

    Zhou, Yu; Shafai, Cyrus

    2016-01-01

    This paper describes the design optimization of a micromachined electric field mill, in relation to maximizing its output signal. The cases studied are for a perforated electrically grounded shutter vibrating laterally over sensing electrodes. It is shown that when modeling the output signal of the sensor, the differential charge on the sense electrodes when exposed to vs. visibly shielded from the incident electric field must be considered. Parametric studies of device dimensions show that t...

  3. Impact of nitinol stent surface processing on in-vivo nickel release and biological response.

    Science.gov (United States)

    Nagaraja, Srinidhi; Sullivan, Stacey J L; Stafford, Philip R; Lucas, Anne D; Malkin, Elon

    2018-03-27

    Although nitinol is widely used in percutaneous cardiovascular interventions, a causal relationship between nickel released from implanted cardiovascular devices and adverse systemic or local biological responses has not been established. The objective of this study was to investigate the relationship between nitinol surface processing, in-vivo nickel release, and biocompatibility. Nitinol stents manufactured using select surface treatments were implanted into the iliac arteries of minipigs for 6 months. Clinical chemistry profile, complete blood count, serum and urine nickel analyses were performed periodically during the implantation period. After explant, stented arteries were either digested and analyzed for local nickel concentration or fixed and sectioned for histopathological analysis of stenosis and inflammation within the artery. The results indicated that markers for liver and kidney function were not different than baseline values throughout 180 days of implantation regardless of surface finish. In addition, white blood cell, red blood cell, and platelet counts were similar to baseline values for all surface finishes. Systemic nickel concentrations in serum and urine were not significantly different between processing groups and comparable to baseline values during 180 days of implantation. However, stents with non-optimized surface finishing had significantly greater nickel levels in the surrounding artery compared to polished stents. These stents had increased stenosis with potential for local inflammation compared to polished stents. These findings demonstrate that proper polishing of nitinol surfaces can reduce in-vivo nickel release locally, which may aid in minimizing adverse inflammatory reactions and restenosis. Nitinol is a commonly used material in cardiovascular medical devices. However, relationships between nitinol surface finishing, in-vivo metal ion release, and adverse biological responses have yet to be established. We addressed

  4. Towards understanding how surface life can affect interior geological processes: a non-equilibrium thermodynamics approach

    Directory of Open Access Journals (Sweden)

    J. G. Dyke

    2011-06-01

    Full Text Available Life has significantly altered the Earth's atmosphere, oceans and crust. To what extent has it also affected interior geological processes? To address this question, three models of geological processes are formulated: mantle convection, continental crust uplift and erosion and oceanic crust recycling. These processes are characterised as non-equilibrium thermodynamic systems. Their states of disequilibrium are maintained by the power generated from the dissipation of energy from the interior of the Earth. Altering the thickness of continental crust via weathering and erosion affects the upper mantle temperature which leads to changes in rates of oceanic crust recycling and consequently rates of outgassing of carbon dioxide into the atmosphere. Estimates for the power generated by various elements in the Earth system are shown. This includes, inter alia, surface life generation of 264 TW of power, much greater than those of geological processes such as mantle convection at 12 TW. This high power results from life's ability to harvest energy directly from the sun. Life need only utilise a small fraction of the generated free chemical energy for geochemical transformations at the surface, such as affecting rates of weathering and erosion of continental rocks, in order to affect interior, geological processes. Consequently when assessing the effects of life on Earth, and potentially any planet with a significant biosphere, dynamical models may be required that better capture the coupled nature of biologically-mediated surface and interior processes.

  5. Surface processing to improve the fatigue resistance of advanced bar steels for automotive applications

    Directory of Open Access Journals (Sweden)

    David K. Matlock

    2005-12-01

    Full Text Available With the development of new steels and processing techniques, there have been corresponding advances in the fatigue performance of automotive components. These advances have led to increased component life and smaller power transfer systems. New processing approaches to enhance the fatigue performance of steels are reviewed with an emphasis on carburizing and deep rolling. Selected examples are presented to illustrate the importance of the base steel properties on the final performance of surface modified materials. Results on carburized gear steels illustrate the dependence of the fatigue behavior on carburizing process control (gas and vacuum carburizing, alloy additions and microstructure. The importance of retained austenite content, case and core grain size as controlled by processing and microalloy additions, extent of intergranular oxidation, and the residual stress profile on fatigue performance is also illustrated. Specific recent results on the use of microalloying elements (e.g. Nb and process history control to limit austenite grain growth at the higher carburizing temperatures associated with vacuum carburizing are highlighted. For crankshaft applications, deep rolling is highlighted, a process to mechanically work fillet surfaces to improve fatigue resistance. The influence of the deformation behavior of the substrate, as characterized by standard tensile and compression tests, on the ability to create desired surface properties and residual stress profiles will be illustrated with data on several new steels of current and future interest for crankshaft applications.

  6. Evaluation of Antibacterial Activity of Titanium Surface Modified by PVD/PACVD Process.

    Science.gov (United States)

    Ji, Min-Kyung; Lee, Min-Joo; Park, Sang-Won; Lee, Kwangmin; Yun, Kwi-Dug; Kim, Hyun-Seung; Oh, Gye-Jeong; Kim, Ji-Hyun; Lim, Hyun-Pil

    2016-02-01

    The aim of this study was to evaluate the response of Streptococcus mutans (S. mutans) via crystal violet staining assay on titanium surface modified by physical vapor deposition/plasma assisted chemical vapor deposition process. Specimens were divided into the following three groups: polished titanium (control group), titanium modified by DC magnetron sputtering (group TiN-Ti), and titanium modified by plasma nitriding (group N-Ti). Surface characteristics of specimens were observed by using nanosurface 3D optical profiler and field emission scanning electron microscope. Group TiN-Ti showed TiN layer of 1.2 microm in thickness. Group N-Ti was identified as plasma nitriding with X-ray photoelectron spectroscopy. Roughness average (Ra) of all specimens had values 0.05). Within the process condition of this study, modified titanium surfaces by DC magnetron sputtering and plasma nitriding did not influence the adhesion of S. mutans.

  7. Analysis of Surface Chemistry and Detector Performance of Chemically Process CdZnTe crystals

    Energy Technology Data Exchange (ETDEWEB)

    HOSSAIN, A.; Yang, G.; Sutton, J.; Zergaw, T.; Babalola, O. S.; Bolotnikov, A. E.; Camarda. ZG. S.; Gul, R.; Roy, U. N., and James, R. B.

    2015-10-05

    The goal is to produce non-conductive smooth surfaces for fabricating low-noise and high-efficiency CdZnTe devices for gamma spectroscopy. Sample preparation and results are discussed. The researachers demonstrated various bulk defects (e.g., dislocations and sub-grain boundaries) and surface defects, and examined their effects on the performance of detectors. A comparison study was made between two chemical etchants to produce non-conductive smooth surfaces. A mixture of bromine and hydrogen peroxide proved more effective than conventional bromine etchant. Both energy resolution and detection efficiency of CZT planar detectors were noticeably increased after processing the detector crystals using improved chemical etchant and processing methods.

  8. Fiscal 1997 report on technological results. R and D on micromachine technology (Development of micro-factory technology); 1997 nendo micromachine gijutsu no kenkyu kaihatsu seika hokokusho. Microfactory gijutsu kaihatsu

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1998-03-01

    Activities are conducted in search of a micromachine system in which devices and equipment relating to machining, assembly, transportation, inspection, etc., in use for a manufacturing process are integrated in a narrow space, for the purpose of conserving energy through the miniaturization of the process of manufacturing small industrial products. With the activities in the two fields of (1) R and D of systematization technology (experimental system for micro fabrication/assembly) and (2) comprehensive investigation and research, examination on detailed specification for the experimental system was carried out, as were the examination of element technologies, element device operating experiments, technological investigation, etc.. In (1), sophistication of the element technologies was contrived that were required for realizing each experimental system, while the detailed specification of each experimental system was decided. Further, a part of the element devices was experimentally manufactured, with the basic functions verified. In (2), research studies were compiled on radio interference for example in the case where various devices were integrated and highly densified through the formation of a micro-factory; also compiled was a joint research with Agency of Industrial Science and Technology, a research conducted for the purpose of building the conception of the micro-factory. (NEDO)

  9. Achievement report for fiscal 1996 on the research and development of micromachine technology. Development of microfactory technology; 1996 nendo micromachine gijutsu no kenkyu kaihatsu seika hokokusho. Microfactory gijutsu kaihatsu

    Energy Technology Data Exchange (ETDEWEB)

    NONE

    1997-03-01

    The goal is to save energy and minimize the working space by constructing a manufacturing system comprising various micromachines with their dimensions fit for parts and products they handle. Development continues relative to microprocessing (electrolysis, and optical processing) and microscopic liquid operation (micropump, and part holding device). Under research in relation to the assembly process are a micro-arm to handle tiny parts and precision techniques for interfitting within a very small microfactory, a piezoelectric actuator for microscopic position adjusting, and ultraprecise microprocessing techniques indispensable for their manufacture. Also under research are the incorporation of optically driven microdevices developed before the preceding fiscal year into a microfactory and the study of microservo actuators capable of sophisticated positioning and velocity control. Concerning the microscopic transport system to deal with microscopic parts and products, studies are under way so as to embody systems driven by actuators of the electromagnetic type and electrostatic type. In this paper, reference is made to inspection techniques and comprehensive investigations. (NEDO)

  10. The free radical process for the polymer surface treated by radio frequency plasma

    International Nuclear Information System (INIS)

    Ma Yuguang; Yang Meiling; Shen Jiacong; Zheng Yingguang

    1992-01-01

    The formation and translation of the free radicals on the polymer surface treated by plasmas were studied and observed by ESR measurement. The results show that C-C bond split was main reaction in the process of the polymer irradiated by plasma, by which a stable alkyl free radical was formed. When alkyl free radical contacted with air, they translate into peroxide radical instantaneously. The peroxide radical was not as stable as radical in vacuum, they can react each other to form some polar-groups on polymer surface. The interaction between the peroxide free radical and polymer chain was correlative not only to the structure of polymer but also to the molecular motion of the polymer chain. The nature of plasma treating polymer surface was that the peroxide radicals were led onto polymer surface

  11. Evaluating the performance of free-formed surface parts using an analytic network process

    Science.gov (United States)

    Qian, Xueming; Ma, Yanqiao; Liang, Dezhi

    2018-03-01

    To successfully design parts with a free-formed surface, the critical issue of how to evaluate and select a favourable evaluation strategy before design is raised. The evaluation of free-formed surface parts is a multiple criteria decision-making (MCDM) problem that requires the consideration of a large number of interdependent factors. The analytic network process (ANP) is a relatively new MCDM method that can systematically deal with all kinds of dependences. In this paper, the factors, which come from the life-cycle and influence the design of free-formed surface parts, are proposed. After analysing the interdependence among these factors, a Hybrid ANP (HANP) structure for evaluating the part’s curved surface is constructed. Then, a HANP evaluation of an impeller is presented to illustrate the application of the proposed method.

  12. Surface of Maximums of AR(2 Process Spectral Densities and its Application in Time Series Statistics

    Directory of Open Access Journals (Sweden)

    Alexander V. Ivanov

    2017-09-01

    Conclusions. The obtained formula of surface of maximums of noise spectral densities gives an opportunity to realize for which values of AR(2 process characteristic polynomial coefficients it is possible to look for greater rate of convergence to zero of the probabilities of large deviations of the considered estimates.

  13. Mathematical Modeling of Aerodynamic Space -to - Surface Flight with Trajectory for Avoid Intercepting Process

    OpenAIRE

    Gornev, Serge

    2006-01-01

    Modeling has been created for a Space-to-Surface system defined for an optimal trajectory for targeting in terminal phase with avoids an intercepting process. The modeling includes models for simulation atmosphere, speed of sound, aerodynamic flight and navigation by an infrared system. The modeling and simulation includes statistical analysis of the modeling results.

  14. Design Process Control for Improved Surface Finish of Metal Additive Manufactured Parts of Complex Build Geometry

    Directory of Open Access Journals (Sweden)

    Mikdam Jamal

    2017-12-01

    Full Text Available Metal additive manufacturing (AM is increasingly used to create complex 3D components at near net shape. However, the surface finish (SF of the metal AM part is uneven, with surface roughness being variable over the facets of the design. Standard post-processing methods such as grinding and linishing often meet with major challenges in finishing parts of complex shape. This paper reports on research that demonstrated that mass finishing (MF processes are able to deliver high-quality surface finishes (Ra and Sa on AM-generated parts of a relatively complex geometry (both internal features and external facets under select conditions. Four processes were studied in this work: stream finishing, high-energy (HE centrifuge, drag finishing and disc finishing. Optimisation of the drag finishing process was then studied using a structured design of experiments (DOE. The effects of a range of finishing parameters were evaluated and optimal parameters and conditions were determined. The study established that the proposed method can be successfully applied in drag finishing to optimise the surface roughness in an industrial application and that it is an economical way of obtaining the maximum amount of information in a short period of time with a small number of tests. The study has also provided an important step in helping understand the requirements of MF to deliver AM-generated parts to a target quality finish and cycle time.

  15. Analysis of irradiation processes for laser-induced periodic surface structures

    NARCIS (Netherlands)

    Eichstädt, J.; Huis In 't Veld, A.J.

    2013-01-01

    The influence of errors on the irradiation process for laser-induced periodic surface structures (LIPSS) was studied theoretically with energy density simulations. Therefore an irradiation model has been extended by a selection of technical variations. The influence of errors has been found in a

  16. Surface runoff in flat terrain: How field topography and runoff generating processes control hydrological connectivity

    NARCIS (Netherlands)

    Appels, W.M.; Bogaart, P.W.; Bogaart, P.W.; Zee, van der S.E.A.T.M.

    2016-01-01

    In flat lowland agricultural catchments in temperate climate zones with highly permeable sandy soils, surface runoff is a rare process with a large impact on the redistribution of sediments and solutes and stream water quality. We examine hydrological data obtained on two field sites in the

  17. TOPICAL REVIEW: Capacitive micromachined ultrasonic transducer arrays for minimally invasive medical ultrasound

    Science.gov (United States)

    Chen, Jingkuang

    2010-02-01

    This paper reviews the minimally invasive capacitive micromachined ultrasonic transducer (CMUT) arrays for medical diagnosis and therapy. While piezoelectric transducers dominate today's medical ultrasound market, the capacitive micromachined ultrasonic transducer has recently emerged as a promising alternative which delivers a comparable device performance to its piezoelectric counterparts, is compatible with front-end circuit integration, allows high-density imager integration and is relative easy in miniaturization. Utilizing MEMS technology, the substrate of CMUT arrays can be micromachined into miniature platforms with various geometrical shapes, which include needles, three-dimensional prisms, as well as other flexible-substrate configurations. These arrays are useful for reaching deep inside the tissue or an organ with a minimally invasive approach. Due to the close proximity of the transducers to the target organ/tissue, a higher resolution/accuracy of diagnostic information can be achieved. In addition to pulse-echo and photoacoustic imaging, high-power CMUT devices capable of delivering ultrasounds with a pressure greater than 1.0 MPa have been monolithically integrated with imager CMUTs for image-guided therapy (IGT). Such miniature devices would facilitate diagnostic and therapy interventions not possible with conventional piezoelectric transducers.

  18. Modeling and Experimental Study on Characterization of Micromachined Thermal Gas Inertial Sensors

    Directory of Open Access Journals (Sweden)

    Yan Su

    2010-09-01

    Full Text Available Micromachined thermal gas inertial sensors based on heat convection are novel devices that compared with conventional micromachined inertial sensors offer the advantages of simple structures, easy fabrication, high shock resistance and good reliability by virtue of using a gaseous medium instead of a mechanical proof mass as key moving and sensing elements. This paper presents an analytical modeling for a micromachined thermal gas gyroscope integrated with signal conditioning. A simplified spring-damping model is utilized to characterize the behavior of the sensor. The model relies on the use of the fluid mechanics and heat transfer fundamentals and is validated using experimental data obtained from a test-device and simulation. Furthermore, the nonideal issues of the sensor are addressed from both the theoretical and experimental points of view. The nonlinear behavior demonstrated in experimental measurements is analyzed based on the model. It is concluded that the sources of nonlinearity are mainly attributable to the variable stiffness of the sensor system and the structural asymmetry due to nonideal fabrication.

  19. Surface characterization and influence of anodizing process on fatigue life of Al 7050 alloy

    International Nuclear Information System (INIS)

    Shahzad, Majid; Chaussumier, Michel; Chieragatti, Remy; Mabru, Catherine; Rezai-Aria, Farhad

    2011-01-01

    Highlights: → We studied the effect of surface treatments on fatigue behaviour of 7050 alloy. → Dissolution of constituent particles in pickling solution result in pits formation. → Decrease is fatigue life caused by anodization is small. → Multi-site cracks initiation has been observed for pickled and anodized specimens. -- Abstract: The present study investigates the influence of anodizing process on fatigue life of aluminium alloy 7050-T7451 by performing axial fatigue tests at stress ratio 'R' of 0.1. Effects of pre-treatments like degreasing and pickling employed prior to anodizing on fatigue life were studied. The post-exposure surface observations were made by scanning electron microscope (SEM) to characterize the effect of each treatment before fatigue testing. The surface observations have revealed that degreasing did not change the surface topography while pickling solution resulted in the formation of pits at the surface. Energy dispersive spectroscopy (EDS) was used to identify those constituent particles which were responsible for the pits formation. These pits are of primary concern with respect to accelerated fatigue crack initiation and subsequent anodic coating formation. The fatigue test results have shown that pickling process was detrimental in reducing the fatigue life significantly while less decrease has been observed for anodized specimens. Analyses of fracture surfaces of pickled specimens have revealed that the process completely changed the crack initiation mechanisms as compared to non-treated specimens and the crack initiation started at the pits. For most of the anodized specimens, fatigue cracks still initiated at the pits with very few cracks initiated from anodic coating. The decrease in fatigue life for pickled and anodized specimens as compared to bare condition has been attributed to decrease in initiation period and multi-site crack initiations. Multi-site crack initiation has resulted in rougher fractured surfaces for

  20. Improvement in the surface quality of structural components produced by the RTM-process

    Energy Technology Data Exchange (ETDEWEB)

    Michaeli, W.; Dyckhoff, J. [Institute of Plastics Processing, Aachen (Germany)

    1993-12-31

    During the production of long or continuous fiber reinforced structural components in Resin Transfer Moulding (RTM), surface defects like voids, pinholes or unevenness frequently occur. These have to be repaired by manual labor before final painting. The conditions for the formation of voids in the laminate as well as surface defects are investigated by model experiments, making use of a window mould. Generally the resin is assumed to flow through the fiber reinforcement in a plug flow. The investigations indicate that advance either in the nonwovens of the surface or in the center of the laminate depends on the flow front velocity. This can be attributed to a superposition of capillary and flow effects. In order to obtain a high surface quality, the flow front velocity has to be kept within a material-related band width. Otherwise, areas of air enclosure in the laminate or surface defects like pinholes will result. With the aid of a steel mould with a large area, procedural variants are investigated to reduce surface faults and to decrease the air content in the laminate. The analysis indicates that the air content can be significantly reduced by injecting the resin into a cavity filled with gaseous acetone and increasing the cavity pressure during the time of curing. Furthermore the long and short-term waviness of the surface is improved by these process modifications.