Design and development of a surface micro-machined push–pull-type true-time-delay phase shifter on an alumina substrate for Ka-band T/R module application

International Nuclear Information System (INIS)

Dey, Sukomal; Koul, Shiban K

2012-01-01

A radio frequency micro-electro-mechanical system (RF-MEMS) phase shifter based on the distributed MEMS transmission line (DMTL) concept towards maximum achievable phase shift with low actuation voltage with good figure of merit (FOM) is presented in this paper. This surface micro-machined analog DMTL phase shifter demonstrates low power consumption for implementation in a Ka-band transmit/receive (T/R) module. The push–pull-type switch has been designed and optimized with an analytical method and validated with simulation, which is the fundamental building block of the design of a true-time-delay phase shifter. Change in phase has been designed and optimized in push and pull states with reference to the up-state performance of the phase shifter. The working principle of this push–pull-type DMTL phase shifter has been comprehensively worked out. A thorough detail of the design and performance analysis of the phase shifter has been carried out with various structural parameters using commercially available simulation tools with reference to a change in phase shift and has been verified using a system level simulation. The phase shifter is fabricated on the alumina substrate, using a suspended gold bridge membrane with a surface micromachining process. Asymmetric behaviour of push–pull bridge configuration has been noted and a corresponding effect on mechanical, electrical and RF performances has been extensively investigated. It is demonstrated 114° dB −1 FOM over 0–40 GHz band, which is the highest achievable FOM from a unit cell on an alumina substrate reported so far. A complete phase shifter contributes to a continuous differential phase shift of 0°–360° over 0–40 GHz band with a minimum actuation voltage of 8.1 V which is the highest achievable phase shift with the lowest actuation voltage as per till date on the alumina substrate with good repeatability and return loss better than 11.5 dB over 0–40 GHz band. (paper)

Micro benchtop optics by bulk silicon micromachining

Science.gov (United States)

Lee, Abraham P.; Pocha, Michael D.; McConaghy, Charles F.; Deri, Robert J.

2000-01-01

Micromachining of bulk silicon utilizing the parallel etching characteristics of bulk silicon and integrating the parallel etch planes of silicon with silicon wafer bonding and impurity doping, enables the fabrication of on-chip optics with in situ aligned etched grooves for optical fibers, micro-lenses, photodiodes, and laser diodes. Other optical components that can be microfabricated and integrated include semi-transparent beam splitters, micro-optical scanners, pinholes, optical gratings, micro-optical filters, etc. Micromachining of bulk silicon utilizing the parallel etching characteristics thereof can be utilized to develop miniaturization of bio-instrumentation such as wavelength monitoring by fluorescence spectrometers, and other miniaturized optical systems such as Fabry-Perot interferometry for filtering of wavelengths, tunable cavity lasers, micro-holography modules, and wavelength splitters for optical communication systems.

X-ray microcalorimeter arrays fabricated by surface micromachining

International Nuclear Information System (INIS)

Hilton, G.C.; Beall, J.A.; Deiker, S.; Vale, L.R.; Doriese, W.B.; Beyer, Joern; Ullom, J.N.; Reintsema, C.D.; Xu, Y.; Irwin, K.D.

2004-01-01

We are developing arrays of Mo/Cu transition edge sensor-based detectors for use as X-ray microcalorimeters and sub-millimeter bolometers. We have fabricated 8x8 pixel X-ray microcalorimeter arrays using surface micromachining. Surface-micromachining techniques hold the promise of scalability to much larger arrays and may allow for the integration of in-plane multiplexer elements. In this paper we describe the surface micromachining process and recent improvements in the device geometry that provide for increased mechanical strength. We also present X-ray and heat pulse spectra collected using these detectors

Micro Electro Mechanical Systems: From Research to Applications

Science.gov (United States)

Lang, Walter; Sandmaier, Hermann

1998-12-01

Micro electro mechanical systems (MEMS) are in the transition phase from research to industry. This paper intends to describe this process from the point of view of a European R&D institution. The MEMS market, its development and its most important products are discussed. In the second part, the R&D activities at HSG-IMIT in Germany are described. The last chapter deals with the cooperation between the R&D institution and industry, in particular with local German small-and medium-sized enterprises.

Micro Elector Mechanical Systems

International Nuclear Information System (INIS)

Yun, Jun Bo; Jo, Il Ju; Choi, Yoon Seok

1996-09-01

This book consists of seven chapters, which are the flow of the age from macro world to micro world, what is MEMS, semiconductor, micro machining and MEMS, where do MEMS goes to?, How to make MEMS, MEMS in the future and knowing about MEMS more than. This book is written to explain in ease and fun. It deals with MEMS in IT, BT, NT, ST, micro robot technology, basic process for making MEMS such as Bulk micromachining, surface micromachining LGA technology, DARPA and organization in domestic and overseas and academy and journal related MEMS.

Macrodesign for microdevices: Polysilicon surface-micromachining technology, applications and issues

Energy Technology Data Exchange (ETDEWEB)

Sniegowski, J.J. [Sandia National Labs., Albuquerque, NM (United States). Intelligent Micromachine Dept.

1997-05-01

The intent of this tutorial is to overview the technology of multi-level polysilicon surface micromachining, to present examples of devices which fully utilize this level of complexity, and to discuss what they believe to be significant issues which are not fully resolved. Following this intent, the tutorial consists of four sections. The first is an introduction and description of multi-level polysilicon surface micromachining and its potential benefits. Specifically, the inclusion of a third deposited layer of mechanical polysilicon greatly extends the degree of complexity available for micromechanism design. The second section introduces wafer planarization by CMP as a process tool for surface micromachining. The third section presents examples of actuated geared micromechanisms which require the multi-level fabrication process. Demonstration of actuation mechanisms coupled to external devices are illustrated. Finally, polysilicon surface micromachining fabrication technology has reached a level where many device designs, for the most part, can be embodied in the technology to produce a mechanical construct which provides the desired function. When designed properly, the fabricated mechanical element, if free to operate, will produce the desired function. However, one set of issues which can hinder or prevent operation are related to the post-fabricated device surfaces. These surface issues; namely, stiction, friction, and wear, are emphasized in the final section as a major hindrance to realizing the full potential of surface micromachined devices.

Micro-electro-mechanical systems (MEMS: Technology for the 21st century

Directory of Open Access Journals (Sweden)

Đakov Tatjana A.

2014-01-01

Full Text Available Micro-electro-mechanical systems (MEMS are miniturized devices that can sense the environment, process and analyze information, and respond with a variety of mechanical and electrical actuators. MEMS consists of mechanical elements, sensors, actuators, electrical and electronics devices on a common silicon substrate. Micro-electro-mechanical systems are becoming a vital technology for modern society. Some of the advantages of MEMS devices are: very small size, very low power consumption, low cost, easy to integrate into systems or modify, small thermal constant, high resistance to vibration, shock and radiation, batch fabricated in large arrays, improved thermal expansion tolerance. MEMS technology is increasingly penetrating into our lives and improving quality of life, similar to what we experienced in the microelectronics revolution. Commercial opportunities for MEMS are rapidly growing in broad application areas, including biomedical, telecommunication, security, entertainment, aerospace, and more in both the consumer and industrial sectors on a global scale. As a breakthrough technology, MEMS is building synergy between previously unrelated fields such as biology and microelectronics. Many new MEMS and nanotechnology applications will emerge, expanding beyond that which is currently identified or known. MEMS are definitely technology for 21st century.

Micro rapid prototyping system for micro components

International Nuclear Information System (INIS)

Li Xiaochun; Choi Hongseok; Yang Yong

2002-01-01

Similarities between silicon-based micro-electro-mechanical systems (MEMS) and Shape Deposition Manufacturing (SDM) processes are obvious: both integrate additive and subtractive processes and use part and sacrificial materials to obtain functional structures. These MEMS techniques are two-dimensional (2-D) processes for a limited number of materials while SDM enables the building of parts that have traditionally been impossible to fabricate because of their complex shapes or of their variety in materials. This work presents initial results on the development of a micro rapid prototyping system that adapts SDM methodology to micro-fabrication. This system is designed to incorporate microdeposition and laser micromachining. In the hope of obtaining a precise microdeposition, an ultrasonic-based micro powder-feeding mechanism was developed in order to form thin patterns of dry powders that can be cladded or sintered onto a substrate by a micro-sized laser beam. Furthermore, experimental results on laser micromachining using a laser beam with a wavelength of 355 nm are also presented. After further improvement, the developed micro manufacturing system could take computer-aided design (CAD) output to reproduce 3-D heterogeneous micro-components from a wide selection of materials

Micro-machined calorimetric biosensors

Science.gov (United States)

Doktycz, Mitchel J.; Britton, Jr., Charles L.; Smith, Stephen F.; Oden, Patrick I.; Bryan, William L.; Moore, James A.; Thundat, Thomas G.; Warmack, Robert J.

2002-01-01

A method and apparatus are provided for detecting and monitoring micro-volumetric enthalpic changes caused by molecular reactions. Micro-machining techniques are used to create very small thermally isolated masses incorporating temperature-sensitive circuitry. The thermally isolated masses are provided with a molecular layer or coating, and the temperature-sensitive circuitry provides an indication when the molecules of the coating are involved in an enthalpic reaction. The thermally isolated masses may be provided singly or in arrays and, in the latter case, the molecular coatings may differ to provide qualitative and/or quantitative assays of a substance.

The Laser MicroJet (LMJ): a multi-solution technology for high quality micro-machining

Science.gov (United States)

Mai, Tuan Anh; Richerzhagen, Bernold; Snowdon, Paul C.; Wood, David; Maropoulos, Paul G.

2007-02-01

The field of laser micromachining is highly diverse. There are many different types of lasers available in the market. Due to their differences in irradiating wavelength, output power and pulse characteristic they can be selected for different applications depending on material and feature size [1]. The main issues by using these lasers are heat damages, contamination and low ablation rates. This report examines on the application of the Laser MicroJet(R) (LMJ), a unique combination of a laser beam with a hair-thin water jet as a universal tool for micro-machining of MEMS substrates, as well as ferrous and non-ferrous materials. The materials include gallium arsenide (GaAs) & silicon wafers, steel, tantalum and alumina ceramic. A Nd:YAG laser operating at 1064 nm (infra red) and frequency doubled 532 nm (green) were employed for the micro-machining of these materials.

Surface-micromachined magnetic undulator with period length between 10μm and 1 mm for advanced light sources

Science.gov (United States)

Harrison, Jere; Joshi, Abhijeet; Lake, Jonathan; Candler, Rob; Musumeci, Pietro

2012-07-01

A technological gap exists between the μm-scale wiggling periods achieved using electromagnetic waves of high intensity laser pulses and the mm scale of permanent-magnet and superconducting undulators. In the sub-mm range, surface-micromachined soft-magnetic micro-electro-mechanical system inductors with integrated solenoidal coils have already experimentally demonstrated 100 to 500 mT field amplitude across air gaps as large as 15μm. Simulations indicate that magnetic fields as large as 1.5 T across 50μm inductor gaps are feasible. A simple rearranging of the yoke and pole geometry allows for fabrication of 10+ cm long undulator structures with period lengths between 12.5μm and 1 mm. Such undulators find application both in high average power spontaneous emission sources and, if used in combination with ultrahigh-brightness electron beams, could lead to the realization of low energy compact free-electron lasers. Challenges include electron energy broadening due to wakefields and Joule heating in the electromagnet.

Micro Electro-Mechanical System (MEMS) Pressure Sensor for Footwear

Science.gov (United States)

Kholwadwala, Deepesh K.; Rohrer, Brandon R.; Spletzer, Barry L.; Galambos, Paul C.; Wheeler, Jason W.; Hobart, Clinton G.; Givler, Richard C.

2008-09-23

Footwear comprises a sole and a plurality of sealed cavities contained within the sole. The sealed cavities can be incorporated as deformable containers within an elastic medium, comprising the sole. A plurality of micro electro-mechanical system (MEMS) pressure sensors are respectively contained within the sealed cavity plurality, and can be adapted to measure static and dynamic pressure within each of the sealed cavities. The pressure measurements can provide information relating to the contact pressure distribution between the sole of the footwear and the wearer's environment.

Studying the mechanism of micromachining by short pulsed laser

Science.gov (United States)

Gadag, Shiva

The semiconductor materials like Si and the transparent dielectric materials like glass and quartz are extensively used in optoelectronics, microelectronics, and microelectromechanical systems (MEMS) industries. The combination of these materials often go hand in hand for applications in MEMS such as in chips for pressure sensors, charge coupled devices (CCD), and photovoltaic (PV) cells for solar energy generation. The transparent negative terminal of the solar cell is made of glass on one surface of the PV cell. The positive terminal (cathode) on the other surface of the solar cell is made of silicon with a glass negative terminal (anode). The digital watches and cell phones, LEDs, micro-lens, optical components, and laser optics are other examples for the application of silicon and or glass. The Si and quartz are materials extensively used in CCD and LED for digital cameras and CD players respectively. Hence, three materials: (1) a semiconductor silicon and transparent dielectrics,- (2) glass, and (3) quartz are chosen for laser micromachining as they have wide spread applications in microelectronics industry. The Q-switched, nanosecond pulsed lasers are most extensively used for micro-machining. The nanosecond type of short pulsed laser is less expensive for the end users than the second type, pico or femto, ultra-short pulsed lasers. The majority of the research work done on these materials (Si, SiO 2, and glass) is based on the ultra-short pulsed lasers. This is because of the cut quality, pin point precision of the drilled holes, formation of the nanometer size microstructures and fine features, and minimally invasive heat affected zone. However, there are many applications such as large surface area dicing, cutting, surface cleaning of Si wafers by ablation, and drilling of relatively large-sized holes where some associated heat affected zone due to melting can be tolerated. In such applications the nanosecond pulsed laser ablation of materials is very

Nano/micro-electro mechanical systems: a patent view

International Nuclear Information System (INIS)

Hu, Guangyuan; Liu, Weishu

2015-01-01

Combining both bibliometrics and citation network analysis, this research evaluates the global development of micro-electro mechanical systems (MEMS) research based on the Derwent Innovations Index database. We found that worldwide, the growth trajectory of MEMS patents demonstrates an approximate S shape, with United States, Japan, China, and Korea leading the global MEMS race. Evidenced by Derwent class codes, the technology structure of global MEMS patents remains steady over time. Yet there does exist a national competitiveness component among the top country players. The latecomer China has become the second most prolific country filing MEMS patents, but its patent quality still lags behind the global average

Nano/micro-electro mechanical systems: a patent view

Energy Technology Data Exchange (ETDEWEB)

Hu, Guangyuan, E-mail: hu.guangyuan@mail.shufe.edu.cn, E-mail: hu.guangyuan@shufe.edu.cn [Shanghai University of Finance and Economics, School of Public Economics and Administration (China); Liu, Weishu [Shanghai Jiao Tong University, Antai College of Economics and Management (China)

2015-12-15

Combining both bibliometrics and citation network analysis, this research evaluates the global development of micro-electro mechanical systems (MEMS) research based on the Derwent Innovations Index database. We found that worldwide, the growth trajectory of MEMS patents demonstrates an approximate S shape, with United States, Japan, China, and Korea leading the global MEMS race. Evidenced by Derwent class codes, the technology structure of global MEMS patents remains steady over time. Yet there does exist a national competitiveness component among the top country players. The latecomer China has become the second most prolific country filing MEMS patents, but its patent quality still lags behind the global average.

Manufacturing microsystems-on-a-chip with 5-level surface micromachining technology

Energy Technology Data Exchange (ETDEWEB)

Sniegowski, J.; Rodgers, M.S.

1998-05-01

An agile microsystem manufacturing technology has been developed that provides unprecedented 5 levels of independent polysilicon surface-micromachine films for the designer. Typical surface-micromachining processes offer a maximum of 3 levels, making this the most complex surface-micromachining process technology developed to date. Leveraged from the extensive infrastructure present in the microelectronics industry, the manufacturing method of polysilicon surface-micromachining offers similar advantages of high-volume, high-reliability, and batch-fabrication to microelectromechanical systems (MEMS) as has been accomplished with integrated circuits (ICs). These systems, comprised of microscopic-sized mechanical elements, are laying the foundation for a rapidly expanding, multi-billion dollar industry 2 which impacts the automotive, consumer product, and medical industries to name only a few.

Nomarski imaging interferometry to measure the displacement field of micro-electro-mechanical systems

International Nuclear Information System (INIS)

Amiot, Fabien; Roger, Jean Paul

2006-01-01

We propose to use a Nomarski imaging interferometer to measure the out-of-plane displacement field of micro-electro-mechanical systems. It is shown that the measured optical phase arises from both height and slope gradients. By using four integrating buckets, a more efficient approach to unwrap the measured phase is presented,thus making the method well suited for highly curved objects. Slope and height effects are then decoupled by expanding the displacement field on a functions basis, and the inverse transformation is applied to get a displacement field from a measured optical phase map change with a mechanical loading. A measurement reproducibility of approximately 10 pm is achieved, and typical results are shown on a microcantilever under thermal actuation, thereby proving the ability of such a setup to provide a reliable full-field kinematic measurement without surface modification

High-frequency micro-machined power inductors

International Nuclear Information System (INIS)

Wang, N.; O'Donnell, T.; Roy, S.; Brunet, M.; McCloskey, P.; O'Mathuna, S.C.

2005-01-01

Power inductors have been fabricated on silicon substrates using low-temperature IC compatible processes. The electrical properties of these micro-inductors have been measured and discussed. A maximum quality factor of 6 at 4 MHz has been achieved with an inductance value of about 160 nH. The DC saturation currents of the non-gapped and gapped inductors are ∼500 and 700 mA, respectively. The relatively high Q factor and the load current characteristics allow these micro-machined inductors to be used in integrated power converters

Gallium nitride-based micro-opto-electro-mechanical systems

Science.gov (United States)

Stonas, Andreas Robert

Gallium Nitride and its associated alloys InGaN and AlGaN have many material properties that are highly desirable for micro-electro-mechanical systems (MEMS), and more specifically micro-opto-electro-mechanical systems (MOEMS). The group III-nitrides are tough, stiff, optically transparent, direct bandgap, chemically inert, highly piezoelectric, and capable of functioning at high temperatures. There is currently no other semiconductor system that possesses all of these properties. Taken together, these attributes make the nitrides prime candidates not only for creating new versions of existing device structures, but also for creating entirely unique devices which combine these properties in novel ways. Unfortunately, their chemical resiliency also makes the group III-nitrides extraordinarily difficult to shape into devices. In particular, until this research, no undercut etch technology existed that could controllably separate a selected part of a MEMS device from its sapphire or silicon carbide substrate. This has effectively prevented GaN-based MEMS from being developed. This dissertation describes how this fabrication obstacle was overcome by a novel etching geometry (bandgap-selective backside-illuminated photoelectochemical (BS-BIPEC) etching) and its resulting morphologies. Several gallium-nitride based MEMS devices were created, actuated, and modelled, including cantilevers and membranes. We describe in particular our pursuit of one of the many novel device elements that is possible only in this material system: a transducer that uses an externally applied strain to dynamically change the optical transition energy of a quantum well. While the device objective of a dynamically tunable quantum well was not achieved, we have demonstrated sufficient progress to believe that such a device will be possible soon. We have observed a shift (5.5meV) of quantum well transition energies in released structures, and we have created structures that can apply large biaxial

Multi-MHz micro-electro-mechanical sensors for atomic force microscopy

Energy Technology Data Exchange (ETDEWEB)

Legrand, Bernard, E-mail: bernard.legrand@laas.fr [LAAS-CNRS, Université de Toulouse, CNRS, 7 avenue du colonel Roche, F-31400 Toulouse (France); Salvetat, Jean-Paul [CRPP, 115 avenue Schweitzer, F-33600 Pessac (France); Walter, Benjamin; Faucher, Marc; Théron, Didier [IEMN, avenue Henri Poincaré, F-59652 Villeneuve d’Ascq (France); Aimé, Jean-Pierre [CBMN, allée Geoffroy Saint Hilaire, Bât. B14, F-33600 Pessac (France)

2017-04-15

Silicon ring-shaped micro-electro-mechanical resonators have been fabricated and used as probes for dynamic atomic force microscopy (AFM) experiments. They offer resotnance frequency above 10 MHz, which is notably greater than that of usual cantilevers and quartz-based AFM probes. On-chip electrical actuation and readout of the tip oscillation are obtained by means of built-in capacitive transducers. Displacement and force resolutions have been determined from noise analysis at 1.5 fm/√Hz and 0.4 pN/√Hz, respectively. Despite the high effective stiffness of the probes, the tip-surface interaction force is kept below 1 nN by using vibration amplitude significantly below 100 pm and setpoint close to the free vibration conditions. Imaging capabilities in amplitude- and frequency-modulation AFM modes have been demonstrated on block copolymer surfaces. Z-spectroscopy experiments revealed that the tip is vibrating in permanent contact with the viscoelastic material, with a pinned contact line. Results are compared to those obtained with commercial AFM cantilevers driven at large amplitudes (>10 nm). - Highlights: • Silicon MEMS resonators are used as AFM probes above 10 MHz. • Integrated capacitive transducers drive and sense sub-nanometer tip oscillation. • Force resolution is below 1 pN/√Hz. • Block copolymer surface is imaged using AM and FM AFM modes. • Probes are operated at small vibration amplitude in permanent viscoelastic contact.

Multi-MHz micro-electro-mechanical sensors for atomic force microscopy

International Nuclear Information System (INIS)

Legrand, Bernard; Salvetat, Jean-Paul; Walter, Benjamin; Faucher, Marc; Théron, Didier; Aimé, Jean-Pierre

2017-01-01

Silicon ring-shaped micro-electro-mechanical resonators have been fabricated and used as probes for dynamic atomic force microscopy (AFM) experiments. They offer resotnance frequency above 10 MHz, which is notably greater than that of usual cantilevers and quartz-based AFM probes. On-chip electrical actuation and readout of the tip oscillation are obtained by means of built-in capacitive transducers. Displacement and force resolutions have been determined from noise analysis at 1.5 fm/√Hz and 0.4 pN/√Hz, respectively. Despite the high effective stiffness of the probes, the tip-surface interaction force is kept below 1 nN by using vibration amplitude significantly below 100 pm and setpoint close to the free vibration conditions. Imaging capabilities in amplitude- and frequency-modulation AFM modes have been demonstrated on block copolymer surfaces. Z-spectroscopy experiments revealed that the tip is vibrating in permanent contact with the viscoelastic material, with a pinned contact line. Results are compared to those obtained with commercial AFM cantilevers driven at large amplitudes (>10 nm). - Highlights: • Silicon MEMS resonators are used as AFM probes above 10 MHz. • Integrated capacitive transducers drive and sense sub-nanometer tip oscillation. • Force resolution is below 1 pN/√Hz. • Block copolymer surface is imaged using AM and FM AFM modes. • Probes are operated at small vibration amplitude in permanent viscoelastic contact.

The Development of Micromachined Gyroscope Structure and Circuitry Technology

Directory of Open Access Journals (Sweden)

Dunzhu Xia

2014-01-01

Full Text Available This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs, piezoelectric vibrating gyroscopes (PVGs, surface acoustic wave (SAW gyroscopes, bulk acoustic wave (BAW gyroscopes, micromachined electrostatically suspended gyroscopes (MESGs, magnetically suspended gyroscopes (MSGs, micro fiber optic gyroscopes (MFOGs, micro fluid gyroscopes (MFGs, micro atom gyroscopes (MAGs, and special micromachined gyroscopes. Next, the control electronics of micromachined gyroscopes are analyzed. The control circuits are categorized into typical circuitry and special circuitry technologies. The typical circuitry technologies include typical analog circuitry and digital circuitry, while the special circuitry consists of sigma delta, mode matching, temperature/quadrature compensation and novel special technologies. Finally, the characteristics of various typical gyroscopes and their development tendency are discussed and investigated in detail.

Compact multichannel high-resolution micro-electro-mechanical systems-based interrogator for Fiber Bragg grating sensing

DEFF Research Database (Denmark)

Ganziy, Denis; Rose, Bjarke; Bang, Ole

2017-01-01

We propose a novel type of compact high-resolution multichannel micro-electro-mechanical systems (MEMS)-based interrogator, where we replace the linear detector with a digital micromirror device (DMD). The DMD is typically cheaper and has better pixel sampling than an InGaAs detector used...

Micro-electro-mechanical systems (MEMS)-based micro-scale direct methanol fuel cell development

International Nuclear Information System (INIS)

Yao, S.-C.; Tang Xudong; Hsieh, C.-C.; Alyousef, Yousef; Vladimer, Michael; Fedder, Gary K.; Amon, Cristina H.

2006-01-01

This paper describes a high-power density, silicon-based micro-scale direct methanol fuel cell (DMFC), under development at Carnegie Mellon. Major issues in the DMFC design include the water management and energy-efficient micro fluidic sub-systems. The air flow and the methanol circulation are both at a natural draft, while a passive liquid-gas separator removes CO 2 from the methanol chamber. An effective approach for maximizing the DMFC energy density, pumping the excess water back to the anode, is illustrated. The proposed DMFC contains several unique features: a silicon wafer with arrays of etched holes selectively coated with a non-wetting agent for collecting water at the cathode; a silicon membrane micro pump for pumping the collected water back to the anode; and a passive liquid-gas separator for CO 2 removal. All of these silicon-based components are fabricated using micro-electro-mechanical systems (MEMS)-based processes on the same silicon wafer, so that interconnections are eliminated, and integration efforts as well as post-fabrication costs are both minimized. The resulting fuel cell has an overall size of one cubic inch, produces a net output of 10 mW, and has an energy density three to five times higher than that of current lithium-ion batteries

Hybrid micromachining using a nanosecond pulsed laser and micro EDM

International Nuclear Information System (INIS)

Kim, Sanha; Chung, Do Kwan; Shin, Hong Shik; Chu, Chong Nam; Kim, Bo Hyun

2010-01-01

Micro electrical discharge machining (micro EDM) is a well-known precise machining process that achieves micro structures of excellent quality for any conductive material. However, the slow machining speed and high tool wear are main drawbacks of this process. Though the use of deionized water instead of kerosene as a dielectric fluid can reduce the tool wear and increase the machine speed, the material removal rate (MRR) is still low. In contrast, laser ablation using a nanosecond pulsed laser is a fast and non-wear machining process but achieves micro figures of rather low quality. Therefore, the integration of these two processes can overcome the respective disadvantages. This paper reports a hybrid process of a nanosecond pulsed laser and micro EDM for micromachining. A novel hybrid micromachining system that combines the two discrete machining processes is introduced. Then, the feasibility and characteristics of the hybrid machining process are investigated compared to conventional EDM and laser ablation. It is verified experimentally that the machining time can be effectively reduced in both EDM drilling and milling by rapid laser pre-machining prior to micro EDM. Finally, some examples of complicated 3D micro structures fabricated by the hybrid process are shown

Characterization and modeling of 2D-glass micro-machining by spark-assisted chemical engraving (SACE) with constant velocity

International Nuclear Information System (INIS)

Didar, Tohid Fatanat; Dolatabadi, Ali; Wüthrich, Rolf

2008-01-01

Spark-assisted chemical engraving (SACE) is an unconventional micro-machining technology based on electrochemical discharge used for micro-machining nonconductive materials. SACE 2D micro-machining with constant speed was used to machine micro-channels in glass. Parameters affecting the quality and geometry of the micro-channels machined by SACE technology with constant velocity were presented and the effect of each of the parameters was assessed. The effect of chemical etching on the geometry of micro-channels under different machining conditions has been studied, and a model is proposed for characterization of the micro-channels as a function of machining voltage and applied speed

Effects of focused ion beam milling on the compressive behavior of directionally solidified micro-pillars and the nanoindentation response of an electro-polished surface

International Nuclear Information System (INIS)

Shim, Sang Hoon; Bei, Hongbin; Miller, Michael K; Pharr, George Mathews; George, Easo P

2009-01-01

Focused ion beam (FIB) milling is the typical way in which micro-pillars are fabricated to study small-scale plasticity and size effects in uniaxial compression. However, FIB milling can introduce defects into the milled pillars. To investigate the effects of FIB damage on mechanical behavior, we tested Mo-alloy micro-pillars that were FIB milled following directional solidification, and compared their compressive response to pillars that were not FIB milled. We also FIB milled at glancing incidence a Mo-alloy single-crystal surface, and compared its nanoindentation response to an electro-polished surface of the same crystal. Consequences for the interpretation of data obtained from FIB milled micro-pillars are discussed

Surface-micromachined magnetic undulator with period length between 10  μm and 1 mm for advanced light sources

Directory of Open Access Journals (Sweden)

Jere Harrison

2012-07-01

Full Text Available A technological gap exists between the μm-scale wiggling periods achieved using electromagnetic waves of high intensity laser pulses and the mm scale of permanent-magnet and superconducting undulators. In the sub-mm range, surface-micromachined soft-magnetic micro-electro-mechanical system inductors with integrated solenoidal coils have already experimentally demonstrated 100 to 500 mT field amplitude across air gaps as large as 15  μm. Simulations indicate that magnetic fields as large as 1.5 T across 50  μm inductor gaps are feasible. A simple rearranging of the yoke and pole geometry allows for fabrication of 10+ cm long undulator structures with period lengths between 12.5  μm and 1 mm. Such undulators find application both in high average power spontaneous emission sources and, if used in combination with ultrahigh-brightness electron beams, could lead to the realization of low energy compact free-electron lasers. Challenges include electron energy broadening due to wakefields and Joule heating in the electromagnet.

Characteristics of semiconductor bridge (SCB) plasma generated in a micro-electro-mechanical system (MEMS)

International Nuclear Information System (INIS)

Kim, Jong-Uk; Park, Chong-Ook; Park, Myung-Il; Kim, Sun-Hwan; Lee, Jung-Bok

2002-01-01

Plasma ignition method has been applied in various fields particularly to the rocket propulsion, pyrotechnics, explosives, and to the automotive air-bag system. Ignition method for those applications should be safe and also operate reliably in hostile environments such as; electromagnetic noise, drift voltage, electrostatic background and so on. In the present Letter, a semiconductor bridge (SCB) plasma ignition device was fabricated and its plasma characteristics including the propagation speed of the plasma, plasma size, and plasma temperature were investigated with the aid of the visualization of micro scale plasma (i.e., ≤350 μm), which generated from a micro-electro-mechanical poly-silicon semiconductor bridge (SCB)

FY 1998 report on the R and D of micromachine technology. R and D of micromachine technology; 1998 nendo micromachine gijutsu no kenkyu kaihatsu seika hokokusho

Energy Technology Data Exchange (ETDEWEB)

NONE

2000-03-01

In the comprehensive investigational study of micromachine technology, the paper aims at clarifying the improvement of functional devices and the future development of micromachine technology for establishment of the technology needed to realize a micromachine system composing of small-functional elements for conducting diagnosis/cure/repair, movement and independent work in small portions in living organism, disaster site, etc. and a medical-use micromachine system to analyze/react on a trace of liquid. In this fiscal year, the following were carried out: 1) study of micromachine systems, 2) study of a medical-use micromachine system to analyze/react on a trace liquid, and 3) comprehensive investigational study. In 1), studies were made toward the minuteness and improvement of micro laser catheter and micro tactile sensor catheter as functional devices which become the main components of micro catheter for cerebrovascular diagnosis/therapy use and toward the minuteness and improvement of disaster relief use micromachine system. In 2), study was made of element technology of a micro-machine system having functions of sampling/analysis/reaction of a trace of liquid. (NEDO)

Ultra-thin film encapsulation processes for micro-electro-mechanical devices and systems

International Nuclear Information System (INIS)

Stoldt, Conrad R; Bright, Victor M

2006-01-01

A range of physical properties can be achieved in micro-electro-mechanical systems (MEMS) through their encapsulation with solid-state, ultra-thin coatings. This paper reviews the application of single source chemical vapour deposition and atomic layer deposition (ALD) in the growth of submicron films on polycrystalline silicon microstructures for the improvement of microscale reliability and performance. In particular, microstructure encapsulation with silicon carbide, tungsten, alumina and alumina-zinc oxide alloy ultra-thin films is highlighted, and the mechanical, electrical, tribological and chemical impact of these overlayers is detailed. The potential use of solid-state, ultra-thin coatings in commercial microsystems is explored using radio frequency MEMS as a case study for the ALD alloy alumina-zinc oxide thin film. (topical review)

An in-pipe mobile micromachine using fluid power. A mechanism adaptable to pipe diameters

International Nuclear Information System (INIS)

Yoshida, Kazuhiro; Yokota, Shinichi; Takahashi, Ken

2000-01-01

To realize micro maintenance robots for small diameter pipes of nuclear reactors and so on, high power in-pipe mobile micromachines have been required. The authors have proposed the bellows microactuator using fluid power and have tried to apply the actuators to in-pipe mobile micromachines. In the previous papers, some inchworm mobile machine prototypes with 25 mm in diameter are fabricated and the traveling performances are experimentally investigated. In this paper, to miniaturize the in-pipe mobile machine and to make it adaptable to pipe diameters, firstly, a simple rubber-tube actuator constrained with a coil-spring is proposed and the static characteristics are investigated. Secondly, a supporting mechanism which utilizes a toggle mechanism and is adaptable to pipe diameters is proposed and the supporting forces are investigated. Finally, an in-pipe mobile micromachine for pipe with 4 - 5 mm in diameter is fabricated and the maximum traveling velocity of 7 mm/s in both ahead and astern movements is experimentally verified. (author)

Achievement report on commissioned research of R and D in fiscal 1999 on micro-machine technologies. R and D of micro-machine technologies; 1999 nendo kenkyu seika hokokusho. Maikuro mashin gijutsu no kenkyu kaihatsu

Energy Technology Data Exchange (ETDEWEB)

NONE

2001-03-01

With an objective to perform diagnoses and medical treatment in space limited portions in living organisms, research on micro-machine systems, research on a scanning type photographing unit in the medical micro-machine, and comprehensive surveys and researches have been conducted. This paper summarizes the achievements in fiscal 1999. In the research of a micro laser catheter, a prototype laser head having an outer diameter of 1 mm was fabricated, whereas composition was realized with a micro catheter having an outer diameter of 1.5 mm. With regard to the micro pressure sensor for catheterization, good active curving action was realized by a catheter in which a pressure sensor is mounted in the SMA curved catheter head. Research on the scanning type photographing unit has been carried out, for reducing further the diameter and size of an endoscope, on a photographing unit using laser beam whose cross section area of the tip optical section is about half of the conventional units. As a result, a high resolution scanning type photographing unit was realized based on the fiber optic system using a scanning mirror. In the comprehensive surveys and researches, items of information were collected in relation with the basic technologies for micro-machines. (NEDO)

Investigation of surface roughness in micro-electro discharge machining of nonconductive ZrO2 for MEMS application

International Nuclear Information System (INIS)

Sabur, A; Moudood, A; Ali, M Y; Maleque, M A

2013-01-01

Micro-electro discharge machining technique, a noncontact machining process, is applied for drilling blind hole on nonconductive ZrO 2 ceramic for MEMS application. A conductive layer of adhesive copper is applied on the workpiece surface to initiate the sparks. Kerosene is used as dielectric for creation of continuous conductive pyrolytic carbon layer on the machined surface. Experiments are conducted by varying the voltage (V), capacitance (C) and rotational speed (N). Correlating these variables a mathematical model for surface roughness (SR) is developed using Taguchi method. The results showed that the V and C are the significant parameters of SR in micro-EDM for nonconductive ZrO 2 ceramic. The model also showed that SR increases with the increase of V and C

Proceedings of the International Conference on Integrated Micro/Nanotechnology for Space Applications

Science.gov (United States)

1995-01-01

The recent evolution of microelectronic technologies coupled with the growth of micro-electro-mechanical systems (MEMS) has had significant impact in the commercial sector. The focus of this conference was to anticipate and extend the incorporation of nano-electronics and MEMS into application specific integrated microinstruments (ASIM's) in space systems. Presentations ranged from mission application of nano-satellites to silicon micromachining for photonic applications.

Hybrid Micro-Electro-Mechanical Tunable Filter

Science.gov (United States)

2007-09-01

and polymer hybrid actuator and applications as a tunable filter in telecom and in IR chemical detector,” in Micromachining and Microfabrication...consistently achieved. At this temperature, SU8 - SU-8 bonding withstood subsequent processing steps, resulting in a 57% bond yield and an overall 30

Advanced measurement and analysis of surface textures produced by micro-machining processes

International Nuclear Information System (INIS)

Bordatchev, Evgueni V; Hafiz, Abdullah M K

2014-01-01

Surface texture of a part or a product has significant effects on its functionality, physical-mechanical properties and visual appearance. In particular for miniature products, the implication of surface quality becomes critical owing to the presence of geometrical features with micro/nano-scale dimensions. Qualitative and quantitative assessments of surface texture are carried out predominantly by profile parameters, which are often insufficient to address the contribution of constituent spatial components with varied amplitudes and wavelengths. In this context, this article presents a novel approach for advanced measurement and analysis of profile average roughness (R a ) and its spatial distribution at different wavelength intervals. The applicability of the proposed approach was verified for three different surface topographies prepared by grinding, laser micro-polishing and micro-milling processes. From the measurement and analysis results, R a (λ) spatial distribution was found to be an effective measure of revealing the contributions of various spatial components within specific wavelength intervals towards formation of the entire surface profile. In addition, the approach was extended to the measurement and analysis of areal average roughness S a (λ) spatial distribution within different wavelength intervals. Besides, the proposed method was demonstrated to be a useful technique in developing a functional correlation between a manufacturing process and its corresponding surface profile. (paper)

Capacitive micromachined ultrasonic transducers for medical imaging and therapy

International Nuclear Information System (INIS)

Khuri-Yakub, Butrus T; Oralkan, Ömer

2011-01-01

Capacitive micromachined ultrasonic transducers (CMUTs) have been subject to extensive research for the last two decades. Although they were initially developed for air-coupled applications, today their main application space is medical imaging and therapy. This paper first presents a brief description of CMUTs, their basic structure and operating principles. Our progression of developing several generations of fabrication processes is discussed with an emphasis on the advantages and disadvantages of each process. Monolithic and hybrid approaches for integrating CMUTs with supporting integrated circuits are surveyed. Several prototype transducer arrays with integrated front-end electronic circuits we developed and their use for 2D and 3D, anatomical and functional imaging, and ablative therapies are described. The presented results prove the CMUT as a micro-electro-mechanical systems technology for many medical diagnostic and therapeutic applications

Damping control of micromachined lowpass mechanical vibration isolation filters using electrostatic actuation with electronic signal processing

Science.gov (United States)

Dean, Robert; Flowers, George; Sanders, Nicole; MacAllister, Ken; Horvath, Roland; Hodel, A. S.; Johnson, Wayne; Kranz, Michael; Whitley, Michael

2005-05-01

Some harsh environments, such as those encountered by aerospace vehicles and various types of industrial machinery, contain high frequency/amplitude mechanical vibrations. Unfortunately, some very useful components are sensitive to these high frequency mechanical vibrations. Examples include MEMS gyroscopes and resonators, oscillators and some micro optics. Exposure of these components to high frequency mechanical vibrations present in the operating environment can result in problems ranging from an increased noise floor to component failure. Passive micromachined silicon lowpass filter structures (spring-mass-damper) have been demonstrated in recent years. However, the performance of these filter structures is typically limited by low damping (especially if operated in near-vacuum environments) and a lack of tunability after fabrication. Active filter topologies, such as piezoelectric, electrostrictive-polymer-film and SMA have also been investigated in recent years. Electrostatic actuators, however, are utilized in many micromachined silicon devices to generate mechanical motion. They offer a number of advantages, including low power, fast response time, compatibility with silicon micromachining, capacitive position measurement and relative simplicity of fabrication. This paper presents an approach for realizing active micromachined mechanical lowpass vibration isolation filters by integrating an electrostatic actuator with the micromachined passive filter structure to realize an active mechanical lowpass filter. Although the electrostatic actuator can be used to adjust the filter resonant frequency, the primary application is for increasing the damping to an acceptable level. The physical size of these active filters is suitable for use in or as packaging for sensitive electronic and MEMS devices, such as MEMS vibratory gyroscope chips.

Fiscal 1993 report on technological results. R and D on micromachine technology; 1993 nendo micro machine gijutsu no kenkyu kaihatsu seika hokokusho

Energy Technology Data Exchange (ETDEWEB)

NONE

1994-12-01

Researches on basic element technology of micromachines are conducted with the view of establishing a mechanical system constituted of minute functional elements that perform autonomous operations in a narrow small part of complicated equipment in a power station for example or in a living body. The areas of activity are 1. research on micro actuators and 2. research on basic technology of micromachine; 1 is classified into researches of (1) shape-memory actuator, (2) bending and stretching type actuator, and (3) integrated micro actuator, while 2 is classified into researches of (1) total system for medical diagnosis, (2) micro tactile sensing technology and laser applied diagnosis/treatment technology, and (3) blood pressure/blood circulation sensing technology. In 1-(1), a chemo-mechanical actuator was studied using a shape memory alloy (SMA) and a high polymer gel, and in 1-(2), an SMA and bimetal were employed as a source of the driving force. Further, examination was also made on a fluid driving type actuator. (NEDO)

A novel surface micromachining process to fabricate AlN unimorph suspensions and its application for RF resonators

NARCIS (Netherlands)

Saravanan, S.; Saravanan, S.; Berenschot, Johan W.; Krijnen, Gijsbertus J.M.; Elwenspoek, Michael Curt

2006-01-01

A novel surface micromachining process is reported for aluminum nitride (AlN) thin films to fabricate piezoelectric unimorph suspension devices for micro actuator applications. Wet anisotropic etching of AlN thin film is used with a Cr metal mask layer in the microfabrication process. Tetra methyl

A Micromachined Capacitive Pressure Sensor Using a Cavity-Less Structure with Bulk-Metal/Elastomer Layers and Its Wireless Telemetry Application

Directory of Open Access Journals (Sweden)

Yogesh B. Gianchandani

2008-04-01

Full Text Available This paper reports a micromachined capacitive pressure sensor intended for applications that require mechanical robustness. The device is constructed with two micromachined metal plates and an intermediate polymer layer that is soft enough to deform in a target pressure range. The plates are formed of micromachined stainless steel fabricated by batch-compatible micro-electro-discharge machining. A polyurethane roomtemperature- vulcanizing liquid rubber of 38-μm thickness is used as the deformable material. This structure eliminates both the vacuum cavity and the associated lead transfer challenges common to micromachined capacitive pressure sensors. For frequency-based interrogation of the capacitance, passive inductor-capacitor tanks are fabricated by combining the capacitive sensor with an inductive coil. The coil has 40 turns of a 127-μmdiameter copper wire. Wireless sensing is demonstrated in liquid by monitoring the variation in the resonant frequency of the tank via an external coil that is magnetically coupled with the tank. The sensitivity at room temperature is measured to be 23-33 ppm/KPa over a dynamic range of 340 KPa, which is shown to match a theoretical estimation. Temperature dependence of the tank is experimentally evaluated.

Simulation of the Mitra 15 micro-machine on IBM 360/91. Microprogramming of the fast Fourier transform

International Nuclear Information System (INIS)

Augustides, Jean

1973-01-01

As computing time did not allow working in real time, and as different methods had been proposed to reduce the computing time (the Cooley-Tuckey method, the use of specific FFT processors), this thesis proposes an intermediate solution, between the entirely programmed solution and the entirely cabled solution. After some generalities on micro-programming (definition, history, benefits and drawbacks, perspectives), the author reports the micro-programming of the Mitra 15 micro-machine: description of the machine, memory, command memory and associated circuits, interruptions and suspensions, descriptions of micro-statements, execution of a micro-statement. Programs and subroutines developed for the modelling of Mitra 15 micro-machine on IBM 360/91 are presented. Then, the author reports the micro-programming of the fast Fourier transform: theory, program description, and test

Fibroblast adhesion and activation onto micro-machined titanium surfaces.

Science.gov (United States)

Guillem-Marti, J; Delgado, L; Godoy-Gallardo, M; Pegueroles, M; Herrero, M; Gil, F J

2013-07-01

Surface modifications performed at the neck of dental implants, in the manner of micro-grooved surfaces, can reduce fibrous tissue encapsulation and prevent bacterial colonization, thereby improving fibrointegration and the formation of a biological seal. However, the applied procedures are technically complex and/or time consuming methods. The aim of this study was to analyse the fibroblast behaviour on modified titanium surfaces obtained, applying a simple and low-cost method. An array of titanium surfaces was obtained using a commercial computerized numerical control lathe, modifying the feed rate and the cutting depth. To elucidate the potential ability of the generated surfaces to activate connective tissue cells, a thorough gene (by real time - qPCR) and protein (by western blot or zymography) expression and cellular response characterization (cell morphology, cell adhesion and cell activation by secreting extracellular matrix (ECM) components and their enzyme regulators) was performed. Micro-grooved surfaces have statistically significant differences in the groove's width (approximately 10, 50 and 100 μm) depending on the applied advancing fixed speed. Field emission scanning electron microscopy images showed that fibroblasts oriented along the generated grooves, but they were only entirely accommodated on the wider grooves (≥50 μm). Micro-grooved surfaces exhibited an earlier cell attachment and activation, as seen by collagen Iα1 and fibronectin deposition and activation of ECM remodelling enzymes, compared with the other surfaces. However, fibroblasts could remain in an activated state on narrower surfaces (fibrotic response. © 2012 John Wiley & Sons A/S.

Micromachined silicon cantilevers with integrated high-frequency magnetoimpedance sensors for simultaneous strain and magnetic field detection

Science.gov (United States)

Buettel, G.; Joppich, J.; Hartmann, U.

2017-12-01

Giant magnetoimpedance (GMI) measurements in the high-frequency regime utilizing a coplanar waveguide with an integrated Permalloy multilayer and micromachined on a silicon cantilever are reported. The fabrication process is described in detail. The aspect ratio of the magnetic multilayer in the magnetoresistive and magnetostrictive device was varied. Tensile strain and compressive strain were applied. Vector network analyzer measurements in the range from the skin effect to ferromagnetic resonance confirm the technological potential of GMI-based micro-electro-mechanical devices for strain and magnetic field sensing applications. The strain-impedance gauge factor was quantified by finite element strain calculations and reaches a maximum value of almost 200.

Numerical modelling of micro-machining of f.c.c. single crystal: Influence of strain gradients

KAUST Repository

Demiral, Murat

2014-11-01

A micro-machining process becomes increasingly important with the continuous miniaturization of components used in various fields from military to civilian applications. To characterise underlying micromechanics, a 3D finite-element model of orthogonal micro-machining of f.c.c. single crystal copper was developed. The model was implemented in a commercial software ABAQUS/Explicit employing a user-defined subroutine VUMAT. Strain-gradient crystal-plasticity and conventional crystal-plasticity theories were used to demonstrate the influence of pre-existing and evolved strain gradients on the cutting process for different combinations of crystal orientations and cutting directions. Crown Copyright © 2014.

A flexible ultrasound transducer array with micro-machined bulk PZT.

Science.gov (United States)

Wang, Zhe; Xue, Qing-Tang; Chen, Yuan-Quan; Shu, Yi; Tian, He; Yang, Yi; Xie, Dan; Luo, Jian-Wen; Ren, Tian-Ling

2015-01-23

This paper proposes a novel flexible piezoelectric micro-machined ultrasound transducer, which is based on PZT and a polyimide substrate. The transducer is made on the polyimide substrate and packaged with medical polydimethylsiloxane. Instead of etching the PZT ceramic, this paper proposes a method of putting diced PZT blocks into holes on the polyimide which are pre-etched. The device works in d31 mode and the electromechanical coupling factor is 22.25%. Its flexibility, good conformal contacting with skin surfaces and proper resonant frequency make the device suitable for heart imaging. The flexible packaging ultrasound transducer also has a good waterproof performance after hundreds of ultrasonic electric tests in water. It is a promising ultrasound transducer and will be an effective supplementary ultrasound imaging method in the practical applications.

A Flexible Ultrasound Transducer Array with Micro-Machined Bulk PZT

Directory of Open Access Journals (Sweden)

Zhe Wang

2015-01-01

Full Text Available This paper proposes a novel flexible piezoelectric micro-machined ultrasound transducer, which is based on PZT and a polyimide substrate. The transducer is made on the polyimide substrate and packaged with medical polydimethylsiloxane. Instead of etching the PZT ceramic, this paper proposes a method of putting diced PZT blocks into holes on the polyimide which are pre-etched. The device works in d31 mode and the electromechanical coupling factor is 22.25%. Its flexibility, good conformal contacting with skin surfaces and proper resonant frequency make the device suitable for heart imaging. The flexible packaging ultrasound transducer also has a good waterproof performance after hundreds of ultrasonic electric tests in water. It is a promising ultrasound transducer and will be an effective supplementary ultrasound imaging method in the practical applications.

Quenching rate for a nonlocal problem arising in the micro-electro mechanical system

Science.gov (United States)

Guo, Jong-Shenq; Hu, Bei

2018-03-01

In this paper, we study the quenching rate of the solution for a nonlocal parabolic problem which arises in the study of the micro-electro mechanical system. This question is equivalent to the stabilization of the solution to the transformed problem in self-similar variables. First, some a priori estimates are provided. In order to construct a Lyapunov function, due to the lack of time monotonicity property, we then derive some very useful and challenging estimates by a delicate analysis. Finally, with this Lyapunov function, we prove that the quenching rate is self-similar which is the same as the problem without the nonlocal term, except the constant limit depends on the solution itself.

Hypersonic force measurements using internal balance based on optical micromachined Fabry-Perot interferometry

Science.gov (United States)

Qiu, Huacheng; Min, Fu; Zhong, Shaolong; Song, Xin; Yang, Yanguang

2018-03-01

Force measurements using wind tunnel balance are necessary for determining a variety of aerodynamic performance parameters, while the harsh environment in hypersonic flows requires that the measurement instrument should be reliable and robust, in against strong electromagnetic interference, high vacuum, or metal (oxide) dusts. In this paper, we demonstrated a three-component internal balance for hypersonic aerodynamic force measurements, using novel optical micromachined Fabry-Perot interferometric (FPI) strain gauges as sensing elements. The FPI gauges were fabricated using Micro-Opto-Electro-Mechanical Systems (MOEMS) surface and bulk fabrication techniques. High-reflectivity coatings are used to form a high-finesse Fabry-Perot cavity, which benefits a high resolution. Antireflective and passivation coatings are used to reduce unwanted interferences. The FPI strain gauge based balance has been calibrated and evaluated in a Mach 5 hypersonic flow. The results are compared with the traditional technique using the foil resistive strain gauge balance, indicating that the proposed balance based on the MOEMS FPI strain gauge is reliable and robust and is potentially suitable for the hypersonic wind tunnel harsh environment.

Relative gravimeter prototype based on micro electro mechanical system

Science.gov (United States)

Rozy, A. S. A.; Nugroho, H. A.; Yusuf, M.

2018-03-01

This research to make gravity measurement system by utilizing micro electro mechanical system based sensor in Gal order. System design consists of three parts, design of hardware, software, and interface. The design of the hardware include of designing the sensor design to measure the value of a stable gravity acceleration. The ADXL345 and ADXL335 sensors are tuned to obtain stable measurements. The design of the instrumentation system the next stage by creating a design to integrate between the sensor, microcontroller, and GPS. The design of programming algorithm is done with Arduino IDE software. The interface design uses a 20x4 LCD display to display the gravity acceleration value and store data on the storage media. The system uses a box made of iron and plate leveling to minimize measurement errors. The sensor test shows the ADXL345 sensor has a more stable value. The system is examined by comparing with gravity measurement of gravimeter A-10 results in Bandung observation post. The result of system test resulted the average of system correction value equal to 0.19 Gal. The system is expected to use for mineral exploration, water supply analyze, and earthquake precursor.

A wafer mapping technique for residual stress in surface micromachined films

International Nuclear Information System (INIS)

Schiavone, G; Murray, J; Smith, S; Walton, A J; Desmulliez, M P Y; Mount, A R

2016-01-01

The design of MEMS devices employing movable structures is crucially dependant on the mechanical behaviour of the deposited materials. It is therefore important to be able to fully characterize the micromachined films and predict with confidence the mechanical properties of patterned structures. This paper presents a characterization technique that enables the residual stress in MEMS films to be mapped at the wafer level by using microstructures released by surface micromachining. These dedicated MEMS test structures and the associated measurement techniques are used to extract localized information on the strain and Young’s modulus of the film under investigation. The residual stress is then determined by numerically coupling this data with a finite element analysis of the structure. This paper illustrates the measurement routine and demonstrates it with a case study using electrochemically deposited alloys of nickel and iron, particularly prone to develop high levels of residual stress. The results show that the technique enables wafer mapping of film non-uniformities and identifies wafer-to-wafer differences. A comparison between the results obtained from the mapping technique and conventional wafer bow measurements highlights the benefits of using a procedure tailored to films that are non-uniform, patterned and surface-micromachined, as opposed to simple standard stress extraction methods. The presented technique reveals detailed information that is generally unexplored when using conventional stress extraction methods such as wafer bow measurements. (paper)

The laser micro-machining system for diamond anvil cell experiments and general precision machining applications at the High Pressure Collaborative Access Team.

Science.gov (United States)

Hrubiak, Rostislav; Sinogeikin, Stanislav; Rod, Eric; Shen, Guoyin

2015-07-01

We have designed and constructed a new system for micro-machining parts and sample assemblies used for diamond anvil cells and general user operations at the High Pressure Collaborative Access Team, sector 16 of the Advanced Photon Source. The new micro-machining system uses a pulsed laser of 400 ps pulse duration, ablating various materials without thermal melting, thus leaving a clean edge. With optics designed for a tight focus, the system can machine holes any size larger than 3 μm in diameter. Unlike a standard electrical discharge machining drill, the new laser system allows micro-machining of non-conductive materials such as: amorphous boron and silicon carbide gaskets, diamond, oxides, and other materials including organic materials such as polyimide films (i.e., Kapton). An important feature of the new system is the use of gas-tight or gas-flow environmental chambers which allow the laser micro-machining to be done in a controlled (e.g., inert gas) atmosphere to prevent oxidation and other chemical reactions in air sensitive materials. The gas-tight workpiece enclosure is also useful for machining materials with known health risks (e.g., beryllium). Specialized control software with a graphical interface enables micro-machining of custom 2D and 3D shapes. The laser-machining system was designed in a Class 1 laser enclosure, i.e., it includes laser safety interlocks and computer controls and allows for routine operation. Though initially designed mainly for machining of the diamond anvil cell gaskets, the laser-machining system has since found many other micro-machining applications, several of which are presented here.

The laser micro-machining system for diamond anvil cell experiments and general precision machining applications at the High Pressure Collaborative Access Team

International Nuclear Information System (INIS)

Hrubiak, Rostislav; Sinogeikin, Stanislav; Rod, Eric; Shen, Guoyin

2015-01-01

We have designed and constructed a new system for micro-machining parts and sample assemblies used for diamond anvil cells and general user operations at the High Pressure Collaborative Access Team, sector 16 of the Advanced Photon Source. The new micro-machining system uses a pulsed laser of 400 ps pulse duration, ablating various materials without thermal melting, thus leaving a clean edge. With optics designed for a tight focus, the system can machine holes any size larger than 3 μm in diameter. Unlike a standard electrical discharge machining drill, the new laser system allows micro-machining of non-conductive materials such as: amorphous boron and silicon carbide gaskets, diamond, oxides, and other materials including organic materials such as polyimide films (i.e., Kapton). An important feature of the new system is the use of gas-tight or gas-flow environmental chambers which allow the laser micro-machining to be done in a controlled (e.g., inert gas) atmosphere to prevent oxidation and other chemical reactions in air sensitive materials. The gas-tight workpiece enclosure is also useful for machining materials with known health risks (e.g., beryllium). Specialized control software with a graphical interface enables micro-machining of custom 2D and 3D shapes. The laser-machining system was designed in a Class 1 laser enclosure, i.e., it includes laser safety interlocks and computer controls and allows for routine operation. Though initially designed mainly for machining of the diamond anvil cell gaskets, the laser-machining system has since found many other micro-machining applications, several of which are presented here

Nickel silicide thin films as masking and structural layers for silicon bulk micro-machining by potassium hydroxide wet etching

International Nuclear Information System (INIS)

Bhaskaran, M; Sriram, S; Sim, L W

2008-01-01

This paper studies the feasibility of using titanium and nickel silicide thin films as mask materials for silicon bulk micro-machining. Thin films of nickel silicide were found to be more resistant to wet etching in potassium hydroxide. The use of nickel silicide as a structural material, by fabricating micro-beams of varying dimensions, is demonstrated. The micro-structures were realized using these thin films with wet etching using potassium hydroxide solution on (1 0 0) and (1 1 0) silicon substrates. These results show that nickel silicide is a suitable alternative to silicon nitride for silicon bulk micro-machining

Advanced Exploration Technologies: Micro and Nano Technologies Enabling Space Missions in the 21st Century

Science.gov (United States)

Krabach, Timothy

1998-01-01

Some of the many new and advanced exploration technologies which will enable space missions in the 21st century and specifically the Manned Mars Mission are explored in this presentation. Some of these are the system on a chip, the Computed-Tomography imaging Spectrometer, the digital camera on a chip, and other Micro Electro Mechanical Systems (MEMS) technology for space. Some of these MEMS are the silicon micromachined microgyroscope, a subliming solid micro-thruster, a micro-ion thruster, a silicon seismometer, a dewpoint microhygrometer, a micro laser doppler anemometer, and tunable diode laser (TDL) sensors. The advanced technology insertion is critical for NASA to decrease mass, volume, power and mission costs, and increase functionality, science potential and robustness.

Micro glow plasma for localized nanostructural modification of carbon nanotube forest

Energy Technology Data Exchange (ETDEWEB)

Sarwar, Mirza Saquib us; Xiao, Zhiming; Saleh, Tanveer; Nojeh, Alireza; Takahata, Kenichi [University of British Columbia, Vancouver, British Columbia V6T 1Z4 (Canada)

2016-08-22

This paper reports the localized selective treatment of vertically aligned carbon nanotubes, or CNT forests, for radial size modification of the nanotubes through a micro-scale glow plasma established on the material. An atmospheric-pressure DC glow plasma is shown to be stably sustained on the surface of the CNT forest in argon using micromachined tungsten electrodes with diameters down to 100 μm. Experiments reveal thinning or thickening of the nanotubes under the micro glow depending on the process conditions including discharge current and process time. These thinning and thickening effects in the treated nanotubes are measured to be up to ∼30% and ∼300% in their diameter, respectively, under the tested conditions. The elemental and Raman analyses suggest that the treated region of the CNT forest is pure carbon and maintains a degree of crystallinity. The local plasma treatment process investigated may allow modification of material characteristics in different domains for targeted regions or patterns, potentially aiding custom design of micro-electro-mechanical systems and other emerging devices enabled by the CNT forest.

Design challenges for stepper motor actuated microvalve based on fine and micro-machining

NARCIS (Netherlands)

Fazal, I.; Elwenspoek, Michael Curt

2007-01-01

We present a normally open stepper motor actuated microvalve based on micro and fine-machining technique. In this paper, first we have described how the larger controllable flow range can be achieved with simple micromachining techniques and secondly we have presented the results which show how the

FY 1994 Report on the technical results. Research and development of micromachine technologies (Development of highly functional maintenance technologies for power plants); 1994 nendo micromachine gijutsu no kenkyu kaihatsu seika hokokusho. Hatsuden shisetsuyo kokino maintenance gijutsu kaihatsu

Energy Technology Data Exchange (ETDEWEB)

NONE

1995-09-01

This research and development project is aimed at development of the technologies for the micromachines provided with maintenance functions, e.g., for examination and maintenance of abnormal conditions in heat exchangers, piping systems or the like. The initial target is set at establishment of basic technologies for the micromachines, in consideration of the available technologies. The R and D activities are directed to (1) microcapsules for, e.g., micro power generators, (2) mother machines having controlling and instructing functions, (3) non-cabled examination modules, (4) cabled examination modules, and (5) total systems. The item (1) involves the micro power generators, and mechanisms of signal transmission, flaw finding and driving/suspension; the item (2) mechanisms of micro-optics and connection, group controlling, microbatteries, action type controlling, and artificial muscles; the item (3) expansion/contraction type transfer mechanisms, light energy supply, micro visual sensation, function connection, and concerted controlling; the item (4) tubular manipulators, and mechanisms of light-aided power generation and voltage elevation; and the item (5) maintenance and micromachine systems. (NEDO)

Chaotic dynamic and control for micro-electro-mechanical systems of massive storage with harmonic base excitation

International Nuclear Information System (INIS)

Perez Polo, Manuel F.; Perez Molina, Manuel; Gil Chica, Javier

2009-01-01

This paper explores chaotic behaviour and control of micro-electro-mechanical systems (MEMS), which consist of thousands of small read/write probe tips that access gigabytes of data stored in a non-volatile magnetic surface. The model of the system is formed by two masses connected by a nonlinear spring and a viscous damping. The paper shows that, by means of an adequate feedback law, the masses can behave as two coupled Duffing's oscillators, which may reach chaotic behaviour when harmonic forces are applied. The chaotic motion is destroyed by applying the following control strategies: (i) static output feedback control law with constant forces and (ii) geometric nonlinear control. The aim is to drive the masses to a set point even with harmonic base excitation, by using chaotic dynamics and nonlinear control. The paper shows that it is possible to obtain a positioning time around a few ms with sub-nanometre accuracy, velocities, accelerations and forces, as it appears in the design of present MEMS devices. Numerical simulations are used to verify the mathematical discussions.

Chaotic dynamic and control for micro-electro-mechanical systems of massive storage with harmonic base excitation

Energy Technology Data Exchange (ETDEWEB)

Perez Polo, Manuel F. [Departamento de Fisica, Ingenieria de Sistemas y Teoria de la Senal, Universidad de Alicante, Escuela Politecnica Superior, Campus de San Vicente, 03071 Alicante (Spain)], E-mail: manolo@dfists.ua.es; Perez Molina, Manuel [Facultad de Ciencias Matematicas, Universidad Nacional de Educacion a Distancia. UNED, C/Boyero 12-1A, Alicante 03007 (Spain)], E-mail: ma_perez_m@hotmail.com; Gil Chica, Javier [Departamento de Fisica, Ingenieria de Sistemas y Teoria de la Senal, Universidad de Alicante, Escuela Politecnica Superior, Campus de San Vicente, 03071 Alicante (Spain)], E-mail: gil@dfists.ua.es

2009-02-15

This paper explores chaotic behaviour and control of micro-electro-mechanical systems (MEMS), which consist of thousands of small read/write probe tips that access gigabytes of data stored in a non-volatile magnetic surface. The model of the system is formed by two masses connected by a nonlinear spring and a viscous damping. The paper shows that, by means of an adequate feedback law, the masses can behave as two coupled Duffing's oscillators, which may reach chaotic behaviour when harmonic forces are applied. The chaotic motion is destroyed by applying the following control strategies: (i) static output feedback control law with constant forces and (ii) geometric nonlinear control. The aim is to drive the masses to a set point even with harmonic base excitation, by using chaotic dynamics and nonlinear control. The paper shows that it is possible to obtain a positioning time around a few ms with sub-nanometre accuracy, velocities, accelerations and forces, as it appears in the design of present MEMS devices. Numerical simulations are used to verify the mathematical discussions.

VOPcPhO:P3HT composite micro-structures with nano-porous surface morphology

Energy Technology Data Exchange (ETDEWEB)

Azmer, Mohamad Izzat [Low Dimensional Materials Research Centre (LDMRC), Department of Physics, Faculty of Science, University of Malaya, 50603 Kuala Lumpur (Malaysia); Ahmad, Zubair, E-mail: zubairtarar@qu.edu.qa [Center for Advanced Materials (CAM), Qatar University, P. O. Box 2713, Doha (Qatar); Sulaiman, Khaulah, E-mail: khaulah@um.edu.my [Low Dimensional Materials Research Centre (LDMRC), Department of Physics, Faculty of Science, University of Malaya, 50603 Kuala Lumpur (Malaysia); Touati, Farid [Department of Electrical Engineering, College of Engineering, Qatar University, P. O. Box 2713, Doha (Qatar); Bawazeer, Tahani M. [Department of Chemistry, Faculty of Applied Science, Umm Al-Qura University, Makkah (Saudi Arabia); Alsoufi, Mohammad S. [Mechanical Engineering Department, College of Engineering and Islamic Architecture, Umm Al-Qura University, Makkah (Saudi Arabia)

2017-03-31

Highlights: • VOPcPhO:P3HT micro-structures with nano-porous surface morphology have been formed. • Multidimensional structures have been formed by electro-spraying technique. • The electro-sprayed films are very promising for the humidity sensors. - Abstract: In this paper, composite micro-structures of Vanadyl 2,9,16,23-tetraphenoxy-29H,31H-phthalocyanine) (VOPcPhO) and Poly (3-hexylthiophene-2,5-diyl) (P3HT) complex with nano-porous surface morphology have been developed by electro-spraying technique. The structural and morphological characteristics of the VOPcPhO:P3HT composite films have been studied by field emission scanning electron microscopy (FESEM) and atomic force microscopy (AFM). The multidimensional VOPcPhO:P3HT micro-structures formed by electro-spraying with nano-porous surface morphology are very promising for the humidity sensors due to the pore sizes in the range of micro to nano-meters scale. The performance of the VOPcPhO:P3HT electro-sprayed sensor is superior in term of sensitivity, hysteresis and response/recovery times as compared to the spin-coated one. The electro-sprayed humidity sensor exhibits ∼3 times and 0.19 times lower hysteresis in capacitive and resistive mode, respectively, as compared to the spin-coated humidity sensor.

Survey of practical application fields of micro-machine and micro-factory technologies in Japan; Nippon ni okeru maikuro machine oyobi maikuro factory gijutsu no jitsuyoka bun`ya chosa

Energy Technology Data Exchange (ETDEWEB)

NONE

1996-02-01

As for micro-machine and micro-factory technologies, research and development trends promoted by private companies were surveyed except for national projects. In the field of main technology development by private companies which do not participate in national projects, developments of micro-devices, such as micro-sensor, and micro-actuator, as well as basic technologies, such as machining, assembly, and material technology, are predominant. The applied fields of these aim at electronic industries for measurement and analysis equipment, motorcar sensors, information, communication, and home electric products. While, there are a few research and developments as to micro-robots. Research and developments aiming at application to medical field are widely promoted by private companies. In this field, micro-machining technology for micro-surgery and endoscopes is prospective. There is a photo-forceps technology for handling the micro-parts. However, there are few researches considering the micro-factory. 146 refs., 73 figs., 7 tabs.

Fabricación de micro-componentes mediante arranque de viruta. análisis del acabado superficial en aleaciones de aluminio y titanio

Directory of Open Access Journals (Sweden)

Francisco Mata Cabrera

2011-07-01

Se proponen modelos de predicción de la rugosidad, con buen grado de aproximación, para ayudar a la caracterización de los procesos de micro-mecanizado. Micro-machining is the most adequate technology for manufacturing of micro-components in the industry. This is a manufacturing precision process with applications in certain industrial field, for example the machining construction. The objective of this research is to analyze the surface quality in micro-machining processes and to evaluate her possible application in mechanical industry (surface roughness, geometry, aspect, etc. This work presents the experimental study of surface roughness (Ra and Rt using a specific micro-turning process. The measures of surface roughness reveal how it is possible to obtain superficial very good qualities up to diameters of 0.05 mm. For low diameters, it worsens the superficial quality and the faults of form increase, due to the low inflexibility of the piece. Prediction models of surface roughness are proposed to the characterization of micro-machining processes.  

Numerical modelling of micro-machining of f.c.c. single crystal: Influence of strain gradients

KAUST Repository

Demiral, Murat; Roy, Anish; El Sayed, Tamer S.; Silberschmidt, Vadim V.

2014-01-01

of orthogonal micro-machining of f.c.c. single crystal copper was developed. The model was implemented in a commercial software ABAQUS/Explicit employing a user-defined subroutine VUMAT. Strain-gradient crystal-plasticity and conventional crystal

Optical wireless communications for micromachines

Science.gov (United States)

O'Brien, Dominic C.; Yuan, Wei Wen; Liu, Jing Jing; Faulkner, Grahame E.; Elston, Steve J.; Collins, Steve; Parry-Jones, Lesley A.

2006-08-01

A key challenge for wireless sensor networks is minimizing the energy required for network nodes to communicate with each other, and this becomes acute for self-powered devices such as 'smart dust'. Optical communications is a potentially attractive solution for such devices. The University of Oxford is currently involved in a project to build optical wireless links to smart dust. Retro-reflectors combined with liquid crystal modulators can be integrated with the micro-machine to create a low power transceiver. When illuminated from a base station a modulated beam is returned, transmitting data. Data from the base station can be transmitted using modulation of the illuminating beam and a receiver at the micro-machine. In this paper we outline the energy consumption and link budget considerations in the design of such micro-machines, and report preliminary experimental results.

Robust micromachining of compliant mechanisms for out-of-plane microsensors

OpenAIRE

Khosraviani, Kourosh

2013-01-01

Micro-Electro-Mechanical-Systems (MEMS) take advantage of a wide range of very reliable, and well established existing microelectronics fabrication techniques. Due to the planar nature of these techniques, out-of-plane MEMS devices must be fabricated in-plane and assembled afterwards in order to create out-of-plane three-dimensional structures. Out-of-plane microstructures extend the design space of the MEMS based devices and overcome many limitations of the in-plane processing. Nevertheless,...

Surface micromachined counter-meshing gears discrimination device

International Nuclear Information System (INIS)

Polosky, M.A.; Garcia, E.J.; Allen, J.J.

1998-01-01

This paper discusses the design, fabrication and testing of a surface micromachined Counter-Meshing Gears (CMG) discrimination device which functions as a mechanically coded lock, A 24 bit code is input to unlock the device. Once unlocked, the device provides a path for an energy or information signal to pass through the device. The device is designed to immediately lock up if any portion of the 24 bit code is incorrect. The motivation for the development of this device is based on occurrences referred to as High Consequence Events, A High Consequence Event is an event where an inadvertent operation of a system could result in the catastrophic loss of life, property, or damage to the environment

Demonstration of Vibrational Braille Code Display Using Large Displacement Micro-Electro-Mechanical Systems Actuators

Science.gov (United States)

Watanabe, Junpei; Ishikawa, Hiroaki; Arouette, Xavier; Matsumoto, Yasuaki; Miki, Norihisa

2012-06-01

In this paper, we present a vibrational Braille code display with large-displacement micro-electro-mechanical systems (MEMS) actuator arrays. Tactile receptors are more sensitive to vibrational stimuli than to static ones. Therefore, when each cell of the Braille code vibrates at optimal frequencies, subjects can recognize the codes more efficiently. We fabricated a vibrational Braille code display that used actuators consisting of piezoelectric actuators and a hydraulic displacement amplification mechanism (HDAM) as cells. The HDAM that encapsulated incompressible liquids in microchambers with two flexible polymer membranes could amplify the displacement of the MEMS actuator. We investigated the voltage required for subjects to recognize Braille codes when each cell, i.e., the large-displacement MEMS actuator, vibrated at various frequencies. Lower voltages were required at vibration frequencies higher than 50 Hz than at vibration frequencies lower than 50 Hz, which verified that the proposed vibrational Braille code display is efficient by successfully exploiting the characteristics of human tactile receptors.

Design and characterization of a microelectromechanical system electro-thermal linear motor with interlock mechanism for micro manipulators.

Science.gov (United States)

Hu, Tengjiang; Zhao, Yulong; Li, Xiuyuan; Zhao, You; Bai, Yingwei

2016-03-01

The design, fabrication, and testing of a novel electro-thermal linear motor for micro manipulators is presented in this paper. The V-shape electro-thermal actuator arrays, micro lever, micro spring, and slider are introduced. In moving operation, the linear motor can move nearly 1 mm displacement with 100 μm each step while keeping the applied voltage as low as 17 V. In holding operation, the motor can stay in one particular position without consuming energy and no creep deformation is found. Actuation force of 12.7 mN indicates the high force generation capability of the device. Experiments of lifetime show that the device can wear over two million cycles of operation. A silicon-on-insulator wafer is introduced to fabricate a high aspect ratio structure and the chip size is 8.5 mm × 8.5 mm × 0.5 mm.

Research on a Micro-Nano Si/SiGe/Si Double Heterojunction Electro-Optic Modulation Structure

Directory of Open Access Journals (Sweden)

Song Feng

2018-01-01

Full Text Available The electro-optic modulator is a very important device in silicon photonics, which is responsible for the conversion of optical signals and electrical signals. For the electro-optic modulator, the carrier density of waveguide region is one of the key parameters. The traditional method of increasing carrier density is to increase the external modulation voltage, but this way will increase the modulation loss and also is not conducive to photonics integration. This paper presents a micro-nano Si/SiGe/Si double heterojunction electro-optic modulation structure. Based on the band theory of single heterojunction, the barrier heights are quantitatively calculated, and the carrier concentrations of heterojunction barrier are analyzed. The band and carrier injection characteristics of the double heterostructure structure are simulated, respectively, and the correctness of the theoretical analysis is demonstrated. The micro-nano Si/SiGe/Si double heterojunction electro-optic modulation is designed and tested, and comparison of testing results between the micro-nano Si/SiGe/Si double heterojunction micro-ring electro-optic modulation and the micro-nano Silicon-On-Insulator (SOI micro-ring electro-optic modulation, Free Spectrum Range, 3 dB Bandwidth, Q value, extinction ratio, and other parameters of the micro-nano Si/SiGe/Si double heterojunction micro-ring electro-optic modulation are better than others, and the modulation voltage and the modulation loss are lower.

Micromachined sensor and actuator research at Sandia`s Microelectronics Development Laboratory

Energy Technology Data Exchange (ETDEWEB)

Smith, J.H.

1996-11-01

An overview of the surface micromachining program at the Microelectronics Development Laboratory of Sandia National Laboratories is presented. Development efforts are underway for a variety of surface micromachined sensors and actuators for both defense and commercial applications. A technology that embeds micromechanical devices below the surface of the wafer prior to microelectronics fabrication has been developed for integrating microelectronics with surface-micromachined micromechanical devices. The application of chemical-mechanical polishing to increase the manufacturability of micromechanical devices is also presented.

Design and Fabrication of Piezoresistive Based Encapsulated Poly-Si Cantilevers for Bio/chemical Sensing

Science.gov (United States)

Krishna, N. P. Vamsi; Murthy, T. R. Srinivasa; Reddy, K. Jayaprakash; Sangeeth, K.; Hegde, G. M.

Cantilever-based sensing is a growing research field not only within micro regime but also in nano technology. The technology offers a method for rapid, on-line and in-situ monitoring of specific bio/chemical substances by detecting the nanomechanical responses of a cantilever sensor. Cantilever with piezoresistive based detection scheme is more attractive because of its electronics compatibility. Majority of commercially available micromachined piezoresistive sensors are bulk micromachined devices and are fabricated using single crystal silicon wafers. As substrate properties are not important in surface micromachining, the expensive silicon wafers can be replaced by cheaper substrates, such as poly-silicon, glass or plastic. Here we have designed SU-8 based bio/chemical compatible micro electro mechanical device that includes an encapsulated polysilicon piezoresistor for bio/chemical sensing. In this paper we report the design, fabrication and analysis of the encapsulated poly-Si cantilevers. Design and theoretical analysis are carried out using Finite Element Analysis software. For fabrication of poly-silicon piezoresistive cantilevers we followed the surface micromachining process steps. Preliminary characterization of the cantilevers is presented.

A level set methodology for predicting the effect of mask wear on surface evolution of features in abrasive jet micro-machining

International Nuclear Information System (INIS)

Burzynski, T; Papini, M

2012-01-01

A previous implementation of narrow-band level set methodology developed by the authors was extended to allow for the modelling of mask erosive wear in abrasive jet micro-machining (AJM). The model permits the prediction of the surface evolution of both the mask and the target simultaneously, by representing them as a hybrid and continuous mask–target surface. The model also accounts for the change in abrasive mass flux incident to both the target surface and, for the first time, the eroding mask edge, that is brought about by the presence of the mask edge itself. The predictions of the channel surface and eroded mask profiles were compared with measurements on channels machined in both glass and poly-methyl-methacrylate (PMMA) targets at both normal and oblique incidence, using tempered steel and elastomeric masks. A much better agreement between the predicted and measured profiles was found when mask wear was taken into account. Mask wear generally resulted in wider and deeper glass target profiles and wider PMMA target profiles, respectively, when compared to cases where no mask wear was present. This work has important implications for the AJM of complex MEMS and microfluidic devices that require longer machining times. (paper)

Micro-patterning of NdFeB and SmCo magnet films for integration into micro-electro-mechanical-systems

International Nuclear Information System (INIS)

Walther, A.; Marcoux, C.; Desloges, B.; Grechishkin, R.; Givord, D.; Dempsey, N.M.

2009-01-01

The integration of high-performance RE-TM (NdFeB and SmCo) hard magnetic films into micro-electro-mechanical-systems (MEMS) requires their patterning at the micron scale. In this paper we report on the applicability of standard micro-fabrication steps (film deposition onto topographically patterned substrates, wet etching and planarization) to the patterning of 5-8 μm thick RE-TM films. While NdFeB comprehensively fills micron-scaled trenches in patterned substrates, SmCo deposits are characterized by poor filling of the trench corners, which poses a problem for further processing by planarization. The magnetic hysteresis loops of both the NdFeB and SmCo patterned films are comparable to those of non-patterned films prepared under the same deposition/annealing conditions. A micron-scaled multipole magnetic field pattern is directly produced by the unidirectional magnetization of the patterned films. NdFeB and SmCo show similar behavior when wet etched in an amorphous state: etch rates of approximately 1.25 μm/min and vertical side walls which may be attributed to a large lateral over-etch of typically 20 μm. Chemical-mechanical-planarization (CMP) produced material removal rates of 0.5-3 μm/min for amorphous NdFeB. Ar ion etching of such films followed by the deposition of a Ta layer prior to film crystallization prevented degradation in magnetic properties compared to non-patterned films

Micro-patterning of NdFeB and SmCo magnet films for integration into micro-electro-mechanical-systems

Energy Technology Data Exchange (ETDEWEB)

Walther, A. [CEA Leti-MINATEC, 17 rue des Martyrs, 38054 Grenoble (France); Institut Neel, CNRS-UJF, 25 rue des Martyrs, 38042 Grenoble (France); Marcoux, C.; Desloges, B. [CEA Leti-MINATEC, 17 rue des Martyrs, 38054 Grenoble (France); Grechishkin, R. [Laboratory of Magnetoelectronics, Tver State University, 170000 Tver (Russian Federation); Givord, D. [Institut Neel, CNRS-UJF, 25 rue des Martyrs, 38042 Grenoble (France); Dempsey, N.M. [Institut Neel, CNRS-UJF, 25 rue des Martyrs, 38042 Grenoble (France)], E-mail: nora.dempsey@grenoble.cnrs.fr

2009-03-15

The integration of high-performance RE-TM (NdFeB and SmCo) hard magnetic films into micro-electro-mechanical-systems (MEMS) requires their patterning at the micron scale. In this paper we report on the applicability of standard micro-fabrication steps (film deposition onto topographically patterned substrates, wet etching and planarization) to the patterning of 5-8 {mu}m thick RE-TM films. While NdFeB comprehensively fills micron-scaled trenches in patterned substrates, SmCo deposits are characterized by poor filling of the trench corners, which poses a problem for further processing by planarization. The magnetic hysteresis loops of both the NdFeB and SmCo patterned films are comparable to those of non-patterned films prepared under the same deposition/annealing conditions. A micron-scaled multipole magnetic field pattern is directly produced by the unidirectional magnetization of the patterned films. NdFeB and SmCo show similar behavior when wet etched in an amorphous state: etch rates of approximately 1.25 {mu}m/min and vertical side walls which may be attributed to a large lateral over-etch of typically 20 {mu}m. Chemical-mechanical-planarization (CMP) produced material removal rates of 0.5-3 {mu}m/min for amorphous NdFeB. Ar ion etching of such films followed by the deposition of a Ta layer prior to film crystallization prevented degradation in magnetic properties compared to non-patterned films.

Electro-mechanical properties of hydrogel composites with micro- and nano-cellulose fillers

International Nuclear Information System (INIS)

Shahid U N, Mohamed; Deshpande, Abhijit P; Rao, C Lakshmana

2015-01-01

Stimuli responsive cross-linked hydrogels are of great interest for applications in diverse fields such as sensors and biomaterials. In this study, we investigate polymer composites filled with cellulose fillers. The celluloses used in making the composites were a microcrystalline cellulose of commercial grade and cellulose nano-whiskers obtained through acid hydrolysis of microcrystalline cellulose. The filler concentration was varied and corresponding physical, mechanical and electro-mechanical characterization was carried out. The electro-mechanical properties were determined using a quasi-static method. The fillers not only enhance the mechanical properties of the composite by providing better reinforcement but also provide a quantitative electric potential in the composite. The measurements reveal that the polymer composites prepared from two different cellulose fillers possess a quantitative electric potential which can be utilized in biomedical applications. It is argued that the mechanism behind the quantitative electric potential in the composites is due to streaming potentials arising due to electrical double layer formation. (paper)

Condensation of sodium on a micromachined surface for AMTEC

International Nuclear Information System (INIS)

Crowley, C.J.; Izenson, M.G.

1993-01-01

A novel condenser component is being developed to enable Alkali Metal Thermal to Electric Conversion (AMTEC) technology to achieve two critical goals: (1) optimization of conversion efficiency and (2) microgravity fluid management. The first goal is achieved by minimizing parasitic radiation heat transfer losses for condensers with a large view factor to the high-temperature β double-prime-alumina surface. The condenser geometry includes a specially designed, micromachined surface where large capillary forces are used to manage the fluid distribution to accomplish the second goal. We present and discuss the results of separate effects experiments investigating the wetting and condensation behavior of sodium on this capillary surface. Test results show that the micromachined surface maintains a smooth, high reflective film of liquid sodium on the surface, which implies reduced parasitic losses and increased conversion efficiencies in AMTEC cells. Accomplishing this in an adverse gravity gradient demonstrates the potential for management of the fluid even under spacecraft acceleration conditions

Electro-chemo-hydro-mechanical coupling in clayey media

International Nuclear Information System (INIS)

Lemaire, Th.

2004-12-01

The aim of this study is to understand coupled phenomena that occur in swelling porous materials like clays. Electro-chemo-hydro-mechanical contributions are taken into account to analyze transfers in such minerals. In a first part, a general discussion is proposed to introduce mineralogical and physico- chemical considerations of clayey media. An important objective of this chapter is to show the crucial role of the microstructure. In a second part is presented an imbibition test in a MX80 bentonite powder. The hydraulic diffusivity versus water content curve's decrease is explained thanks to a double porosity model that shows the progressive collapse of meso-pores due to swelling effects at the micro-scale. Thus a multi-scale analysis is necessary to well describe clayey media behaviour. The third chapter exposes such a multi-scale modelling (periodic homogenization). It is based on the double-layer theory and introduces an innovative concept of virtual electrolyte solution. First numerical results are given in a simple geometry (parallel platelets). In the next part are proposed numerical simulations of two kinds: response of the system to a chemical gradient and simulation of electro-osmosis. The end of this chapter puts into relief the necessity to integrate pH effects in the model. In the last part, chemical surface exchanges are incorporated in the modelling to understand pH and ionic force roles in electro-osmotic process. (author)

Silicon micromachining using a high-density plasma source

International Nuclear Information System (INIS)

McAuley, S.A.; Ashraf, H.; Atabo, L.; Chambers, A.; Hall, S.; Hopkins, J.; Nicholls, G.

2001-01-01

Dry etching of Si is critical in satisfying the demands of the micromachining industry. The micro-electro-mechanical systems (MEMS) community requires etches capable of high aspect ratios, vertical profiles, good feature size control and etch uniformity along with high throughput to satisfy production requirements. Surface technology systems' (STS's) high-density inductively coupled plasma (ICP) etch tool enables a wide range of applications to be realized whilst optimizing the above parameters. Components manufactured from Si using an STS ICP include accelerometers and gyroscopes for military, automotive and domestic applications. STS's advanced silicon etch (ASE TM ) has also allowed the first generation of MEMS-based optical switches and attenuators to reach the marketplace. In addition, a specialized application for fabricating the next generation photolithography exposure masks has been optimized for 200 mm diameter wafers, to depths of ∼750 μm. Where the profile is not critical, etch rates of greater than 8 μm min -1 have been realized to replace previous methods such as wet etching. This is also the case for printer applications. Specialized applications that require etching down to pyrex or oxide often result in the loss of feature size control at the interface; this is an industry wide problem. STS have developed a technique to address this. The rapid progression of the industry has led to development of the STS ICP etch tool, as well as the process. (author)

A micromachined surface stress sensor with electronic readout

NARCIS (Netherlands)

Carlen, Edwin; Weinberg, M.S.; Zapata, A.M.; Borenstein, J.T.

2008-01-01

A micromachined surface stress sensor has been fabricated and integrated off chip with a low-noise, differential capacitance, electronic readout circuit. The differential capacitance signal is modulated with a high frequency carrier signal, and the output signal is synchronously demodulated and

Micromachined silicon acoustic delay line with 3D-printed micro linkers and tapered input for improved structural stability and acoustic directivity

International Nuclear Information System (INIS)

Cho, Y; Kumar, A; Xu, S; Zou, J

2016-01-01

Recent studies have shown that micromachined silicon acoustic delay lines can provide a promising solution to achieve real-time photoacoustic tomography without the need for complex transducer arrays and data acquisition electronics. To achieve deeper imaging depth and wider field of view, a longer delay time and therefore delay length are required. However, as the length of the delay line increases, it becomes more vulnerable to structural instability due to reduced mechanical stiffness. In this paper, we report the design, fabrication, and testing of a new silicon acoustic delay line enhanced with 3D printed polymer micro linker structures. First, mechanical deformation of the silicon acoustic delay line (with and without linker structures) under gravity was simulated by using finite element method. Second, the acoustic crosstalk and acoustic attenuation caused by the polymer micro linker structures were evaluated with both numerical simulation and ultrasound transmission testing. The result shows that the use of the polymer micro linker structures significantly improves the structural stability of the silicon acoustic delay lines without creating additional acoustic attenuation and crosstalk. In addition, the improvement of the acoustic acceptance angle of the silicon acoustic delay lines was also investigated to better suppress the reception of unwanted ultrasound signals outside of the imaging plane. These two improvements are expected to provide an effective solution to eliminate current limitations on the achievable acoustic delay time and out-of-plane imaging resolution of micromachined silicon acoustic delay line arrays. (paper)

Micro-machinable polymer-derived ceramic sensors for high-temperature applications

Science.gov (United States)

Liu, Jian; Xu, Chengying; An, Linan

2010-04-01

Micro-sensors are highly desired for on-line temperature/pressure monitoring in turbine engines to improve their efficiency and reduce pollution. The biggest challenge for developing this type of sensors is that the sensors have to sustain at extreme environments in turbine engine environments, such as high-temperatures (>800 °C), fluctuated pressure and oxidation/corrosion surroundings. In this paper, we describe a class of sensors made of polymer-derived ceramics (PDCs) for such applications. PDCs have the following advantages over conventional ceramics, making them particularly suitable for these applications: (i) micromachining capability, (ii) tunable electric properties, and (iii) hightemperature capability. Here, we will discuss the materials and their properties in terms of their applications for hightemperature micro-sensors, and microfabrication technologies. In addition, we will also discuss the design of a heat-flux sensor based on polymer-derived ceramics.

Fiscal 1997 report on technological results. R and D on micromachine technology; 1997 nendo micromachine gijutsu no kenkyu kaihatsu seika hokokusho

Energy Technology Data Exchange (ETDEWEB)

NONE

1998-03-01

Researches on basic element technology of micromachines are conducted that operate autonomously in a narrow small part in a complicated apparatus or in vivo. The areas of activity are 1. research on micromachine systems and 2. comprehensive investigation and research. In 1, (1) a micro catheter and (2) a micro tactile sensor catheter were studied while, in 2, basic technology and technological problems, particularly those problems concerning sophistication in the medical field were examined and studied. Further, in (1), with the purpose of developing a micro laser catheter for diagnosis/treatment, researches were implemented on the technology of integrating micro laser and an optical fiber which were components of the catheter and on the fabrication of the fine diameter of a micro catheter as well as on the characteristical improvement of the base body on which minute elements were mounted. In (2), characteristical improvement and sophistication were carried out for a high sensitivity contact pressure sensor and a diagnostic tactile sensor, which are mounted on a catheter having a positive bulge control mechanism for insertion into body cavity, with a sensor probe manufactured experimentally. (NEDO)

Chronic behavior evaluation of a micro-machined neural implant with optimized design based on an experimentally derived model.

Science.gov (United States)

Andrei, Alexandru; Welkenhuysen, Marleen; Ameye, Lieveke; Nuttin, Bart; Eberle, Wolfgang

2011-01-01

Understanding the mechanical interactions between implants and the surrounding tissue is known to have an important role for improving the bio-compatibility of such devices. Using a recently developed model, a particular micro-machined neural implant design aiming the reduction of insertion forces dependence on the insertion speed was optimized. Implantations with 10 and 100 μm/s insertion speeds showed excellent agreement with the predicted behavior. Lesion size, gliosis (GFAP), inflammation (ED1) and neuronal cells density (NeuN) was evaluated after 6 week of chronic implantation showing no insertion speed dependence.

High-intensity fibre laser design for micro-machining applications

Science.gov (United States)

Ortiz-Neria, D. I.; Martinez-Piñón, F.; Hernandez-Escamilla, H.; Alvarez-Chavez, J. A.

2010-11-01

This work is focused on the design of a 250W high-intensity continuous-wave fibre optic laser with a 15μm spot size beam and a beam parameter product (BPP) of 1.8 for its use on Laser-assisted Cold Spray process (LCS) in the micro-machining areas. The metal-powder deposition process LCS, is a novel method based on Cold Spray technique (CS) assisted by laser technology. The LCS accelerates metal powders by the use of a high-pressure gas in order to achieve flash welding of particles over substrate. In LCS, the critical velocity of impact is lower with respect with CS while the powder particle is heated before the deposition by a laser beam. Furthermore, LCS does not heat the powder to achieve high temperatures as it happens in plasma processes. This property puts aside cooling problems which normally happen in sintered processes with high oxygen/nitrogen concentration levels. LCS will be used not only in deposition of thin layers. After careful design, proof of concept, experimental data, and prototype development, it should be feasible to perform micro-machining precise work with the use of the highintensity fibre laser presented in this work, and selective deposition of particles, in a similar way to the well-known Direct Metal Laser Sintering process (DMLS). The fibre laser consists on a large-mode area, Yb3+-doped, semi-diffraction limited, 25-m fibre laser cavity, operating in continuous wave regime. The fibre shows an arguably high slope-efficiency with no signs of roll-over. The measured M2 value is 1.8 and doping concentration of 15000ppm. It was made with a slight modification of the traditional MCVD technique. A full optical characterization will be presented.

Modeling and evaluating of surface roughness prediction in micro-grinding on soda-lime glass considering tool characterization

Science.gov (United States)

Cheng, Jun; Gong, Yadong; Wang, Jinsheng

2013-11-01

The current research of micro-grinding mainly focuses on the optimal processing technology for different materials. However, the material removal mechanism in micro-grinding is the base of achieving high quality processing surface. Therefore, a novel method for predicting surface roughness in micro-grinding of hard brittle materials considering micro-grinding tool grains protrusion topography is proposed in this paper. The differences of material removal mechanism between convention grinding process and micro-grinding process are analyzed. Topography characterization has been done on micro-grinding tools which are fabricated by electroplating. Models of grain density generation and grain interval are built, and new predicting model of micro-grinding surface roughness is developed. In order to verify the precision and application effect of the surface roughness prediction model proposed, a micro-grinding orthogonally experiment on soda-lime glass is designed and conducted. A series of micro-machining surfaces which are 78 nm to 0.98 μm roughness of brittle material is achieved. It is found that experimental roughness results and the predicting roughness data have an evident coincidence, and the component variable of describing the size effects in predicting model is calculated to be 1.5×107 by reverse method based on the experimental results. The proposed model builds a set of distribution to consider grains distribution densities in different protrusion heights. Finally, the characterization of micro-grinding tools which are used in the experiment has been done based on the distribution set. It is concluded that there is a significant coincidence between surface prediction data from the proposed model and measurements from experiment results. Therefore, the effectiveness of the model is demonstrated. This paper proposes a novel method for predicting surface roughness in micro-grinding of hard brittle materials considering micro-grinding tool grains protrusion

High speed electro optic polymer micro-ringresonator

NARCIS (Netherlands)

Leinse, Arne; Diemeer, Mart; Driessen, A.

2004-01-01

An electro-optic polymer micro-ring resonator for high speed modulation was designed, realized and characterized. The design of layer-stack and electrodes was done such that modulation frequencies up till 1 GHz should be possible. The device consists of a ridge waveguide, defined in a negative

Predicting the Deflections of Micromachined Electrostatic Actuators Using Artificial Neural Network (ANN

Directory of Open Access Journals (Sweden)

Hing Wah LEE

2009-03-01

Full Text Available In this study, a general purpose Artificial Neural Network (ANN model based on the feed-forward back-propagation (FFBP algorithm has been used to predict the deflections of a micromachined structures actuated electrostatically under different loadings and geometrical parameters. A limited range of simulation results obtained via CoventorWare™ numerical software will be used initially to train the neural network via back-propagation algorithm. The micromachined structures considered in the analyses are diaphragm, fixed-fixed beams and cantilevers. ANN simulation results are compared with results obtained via CoventorWare™ simulations and existing analytical work for validation purpose. The proposed ANN model accurately predicts the deflections of the micromachined structures with great reduction of simulation efforts, establishing the method superiority. This method can be extended for applications in other sensors particularly for modeling sensors applying electrostatic actuation which are difficult in nature due to the inherent non-linearity of the electro-mechanical coupling response.

Surface effects on anti-plane shear waves propagating in magneto-electro-elastic nanoplates

International Nuclear Information System (INIS)

Wu, Bin; Zhang, Chunli; Chen, Weiqiu; Zhang, Chuanzeng

2015-01-01

Material surfaces may have a remarkable effect on the mechanical behavior of magneto-electro-elastic (or multiferroic) structures at nanoscale. In this paper, a surface magneto-electro-elasticity theory (or effective boundary condition formulation), which governs the motion of the material surface of magneto-electro-elastic nanoplates, is established by employing the state-space formalism. The properties of anti-plane shear (SH) waves propagating in a transversely isotropic magneto-electro-elastic plate with nanothickness are investigated by taking surface effects into account. The size-dependent dispersion relations of both antisymmetric and symmetric SH waves are presented. The thickness-shear frequencies and the asymptotic characteristics of the dispersion relations considering surface effects are determined analytically as well. Numerical results show that surface effects play a very pronounced role in elastic wave propagation in magneto-electro-elastic nanoplates, and the dispersion properties depend strongly on the chosen surface material parameters of magneto-electro-elastic nanoplates. As a consequence, it is possible to modulate the waves in magneto-electro-elastic nanoplates through surface engineering. (paper)

Compliant electro-thermal microactuators

DEFF Research Database (Denmark)

Jonsmann, Jacques; Sigmund, Ole; Bouwstra, Siebe

1999-01-01

This paper describes design, microfabrication and characterisation of topology optimised compliant electro-thermal microactuators. The actuators are fabricated by a fast prototyping process using laser micromachining and electroplating. Actuators are characterised with respect to displacement...

Electro-mechanical probe positioning system for large volume plasma device

Science.gov (United States)

Sanyasi, A. K.; Sugandhi, R.; Srivastava, P. K.; Srivastav, Prabhakar; Awasthi, L. M.

2018-05-01

An automated electro-mechanical system for the positioning of plasma diagnostics has been designed and implemented in a Large Volume Plasma Device (LVPD). The system consists of 12 electro-mechanical assemblies, which are orchestrated using the Modbus communication protocol on 4-wire RS485 communications to meet the experimental requirements. Each assembly has a lead screw-based mechanical structure, Wilson feed-through-based vacuum interface, bipolar stepper motor, micro-controller-based stepper drive, and optical encoder for online positioning correction of probes. The novelty of the system lies in the orchestration of multiple drives on a single interface, fabrication and installation of the system for a large experimental device like the LVPD, in-house developed software, and adopted architectural practices. The paper discusses the design, description of hardware and software interfaces, and performance results in LVPD.

Effect of fluorocarbon self-assembled monolayer films on sidewall adhesion and friction of surface micromachines with impacting and sliding contact interfaces

International Nuclear Information System (INIS)

Xiang, H.; Komvopoulos, K.

2013-01-01

A self-assembled monolayer film consisting of fluoro-octyltrichlorosilane (FOTS) was vapor-phase deposited on Si(100) substrates and polycrystalline silicon (polysilicon) surface micromachines. The hydrophobic behavior and structural composition of the FOTS film deposited on Si(100) were investigated by goniometry and X-ray photoelectron spectroscopy, respectively. The effects of contact pressure, relative humidity, temperature, and impact/sliding cycles on the adhesive and friction behavior of uncoated and FOTS-coated polysilicon micromachines (referred to as the Si and FOTS/Si micromachines, respectively) were investigated under controlled loading and environmental conditions. FOTS/Si micromachines demonstrated much lower and stable adhesion than Si micromachines due to the highly hydrophobic and conformal FOTS film. Contrary to Si micromachines, sidewall adhesion of FOTS/Si micromachines demonstrated a weak dependence on relative humidity, temperature, and impact cycles. In addition, FOTS/Si micromachines showed low and stable adhesion and low static friction for significantly more sliding cycles than Si micromachines. The adhesive and static friction characteristics of Si and FOTS/Si micromachines are interpreted in the context of physicochemical surface changes, resulting in the increase of the real area of contact and a hydrophobic-to-hydrophilic transition of the surface chemical characteristics caused by nanoscale surface smoothening and the removal of the organic residue (Si micromachines) or the FOTS film (FOTS/Si micromachines) during repetitive impact and oscillatory sliding of the sidewall surfaces.

Electro-thermal modelling of anode and cathode in micro-EDM

International Nuclear Information System (INIS)

Yeo, S H; Kurnia, W; Tan, P C

2007-01-01

Micro-electrical discharge machining is an evolution of conventional EDM used for fabricating three-dimensional complex micro-components and microstructure with high precision capabilities. However, due to the stochastic nature of the process, it has not been fully understood. This paper proposes an analytical model based on electro-thermal theory to estimate the geometrical dimensions of micro-crater. The model incorporates voltage, current and pulse-on-time during material removal to predict the temperature distribution on the workpiece as a result of single discharges in micro-EDM. It is assumed that the entire superheated area is ejected from the workpiece surface while only a small fraction of the molten area is expelled. For verification purposes, single discharge experiments using RC pulse generator are performed with pure tungsten as the electrode and AISI 4140 alloy steel as the workpiece. For the pulse-on-time range up to 1000 ns, the experimental and theoretical results are found to be in close agreement with average volume approximation errors of 2.7% and 6.6% for the anode and cathode, respectively

Electro-thermal modelling of anode and cathode in micro-EDM

Energy Technology Data Exchange (ETDEWEB)

Yeo, S H; Kurnia, W; Tan, P C [School of Mechanical and Aerospace Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798 (Singapore)

2007-04-21

Micro-electrical discharge machining is an evolution of conventional EDM used for fabricating three-dimensional complex micro-components and microstructure with high precision capabilities. However, due to the stochastic nature of the process, it has not been fully understood. This paper proposes an analytical model based on electro-thermal theory to estimate the geometrical dimensions of micro-crater. The model incorporates voltage, current and pulse-on-time during material removal to predict the temperature distribution on the workpiece as a result of single discharges in micro-EDM. It is assumed that the entire superheated area is ejected from the workpiece surface while only a small fraction of the molten area is expelled. For verification purposes, single discharge experiments using RC pulse generator are performed with pure tungsten as the electrode and AISI 4140 alloy steel as the workpiece. For the pulse-on-time range up to 1000 ns, the experimental and theoretical results are found to be in close agreement with average volume approximation errors of 2.7% and 6.6% for the anode and cathode, respectively.

Electro-thermal modelling of anode and cathode in micro-EDM

Science.gov (United States)

Yeo, S. H.; Kurnia, W.; Tan, P. C.

2007-04-01

Micro-electrical discharge machining is an evolution of conventional EDM used for fabricating three-dimensional complex micro-components and microstructure with high precision capabilities. However, due to the stochastic nature of the process, it has not been fully understood. This paper proposes an analytical model based on electro-thermal theory to estimate the geometrical dimensions of micro-crater. The model incorporates voltage, current and pulse-on-time during material removal to predict the temperature distribution on the workpiece as a result of single discharges in micro-EDM. It is assumed that the entire superheated area is ejected from the workpiece surface while only a small fraction of the molten area is expelled. For verification purposes, single discharge experiments using RC pulse generator are performed with pure tungsten as the electrode and AISI 4140 alloy steel as the workpiece. For the pulse-on-time range up to 1000 ns, the experimental and theoretical results are found to be in close agreement with average volume approximation errors of 2.7% and 6.6% for the anode and cathode, respectively.

An electro-thermally activated rotary micro-positioner for slider-level dual-stage positioning in hard disk drives

International Nuclear Information System (INIS)

Lau, Gih Keong; Chong, Nyok Boon; Yang, Jiaping; Tan, Cheng Peng

2016-01-01

Slider-level micro-positioners are useful to assist a voice coil motor to perform fine head positioning over a Tb/in 2 magnetic disk. Recently, a new kind of slider-level micro-positioner was developed using the thermal unimorph of the Si/SU8 composite. It has the advantages of a very small footprint and high mechanical resonant frequency, but its stroke generation is inadequate, with a 50 nm dynamic stroke at 1 kHz. There is a need for a larger thermally induced stroke. This paper presents a rotary design of an electrothermal micro-positioner to address the stroke requirements without consuming more power or decreasing the mechanical resonant frequency. Experimental studies show the present rotary design can produce a six-fold larger displacement, as compared to the previous lateral design, while possessing a 35 kHz resonant frequency. In addition, simple analytical models were developed to estimate: (i) the rotational stiffness and system’s natural frequency, (ii) thermal unimorph bending and stage rotation, and (iii) the system’s thermal time constant for this rotary electro-thermal micro-positioner. This study found that this rotary electro-thermal micro-positioner can meet the basic stroke requirement and high mechanical resonant frequency for a moving slider, but its thermal cut-off frequency needs to be increased further. (paper)

Development of a Surface Micromachined On-Chip Flat Disk Micropump

Directory of Open Access Journals (Sweden)

M. I. KILANI

2009-08-01

Full Text Available The paper presents research progress in the development of a surface micromachined flat disk micropump which employs the viscous and centrifugal effects acting on a layer of fluid sandwiched between a rotating flat disk and a stationary plate. The pump is fabricated monolithically on-chip using Sandia’s Ultraplanar Multilevel MEMS Technology (SUMMiT™ where an electrostatic comb-drive Torsional Ratcheting Actuator (TRA drives the flat disk through a geared transmission. The paper reviews available analytical models for flow geometries similar to that of the described pump, and presents a set of experiments which depict its performance and possible failure modes. Those experiments highlight future research directions in the development of electrostatically-actuated, CMOS-compatible, surface micromachined pumps.

Electro-chemo-hydro-mechanical coupling in clayey media; Couplage electro-chimio-hydro-mecaniques dans les milieux argileux

Energy Technology Data Exchange (ETDEWEB)

Lemaire, Th

2004-12-15

The aim of this study is to understand coupled phenomena that occur in swelling porous materials like clays. Electro-chemo-hydro-mechanical contributions are taken into account to analyze transfers in such minerals. In a first part, a general discussion is proposed to introduce mineralogical and physico- chemical considerations of clayey media. An important objective of this chapter is to show the crucial role of the microstructure. In a second part is presented an imbibition test in a MX80 bentonite powder. The hydraulic diffusivity versus water content curve's decrease is explained thanks to a double porosity model that shows the progressive collapse of meso-pores due to swelling effects at the micro-scale. Thus a multi-scale analysis is necessary to well describe clayey media behaviour. The third chapter exposes such a multi-scale modelling (periodic homogenization). It is based on the double-layer theory and introduces an innovative concept of virtual electrolyte solution. First numerical results are given in a simple geometry (parallel platelets). In the next part are proposed numerical simulations of two kinds: response of the system to a chemical gradient and simulation of electro-osmosis. The end of this chapter puts into relief the necessity to integrate pH effects in the model. In the last part, chemical surface exchanges are incorporated in the modelling to understand pH and ionic force roles in electro-osmotic process. (author)

A surface-micromachining-based inertial micro-switch with compliant cantilever beam as movable electrode for enduring high shock and prolonging contact time

Energy Technology Data Exchange (ETDEWEB)

Xu, Qiu [National Key Laboratory of Science and Technology on Micro/Nano Fabrication, School of Electronics Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai, 200240 (China); Yang, Zhuoqing, E-mail: yzhuoqing@sjtu.edu.cn [National Key Laboratory of Science and Technology on Micro/Nano Fabrication, School of Electronics Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai, 200240 (China); Fu, Bo; Li, Jianhua; Wu, Hao [Huaihai Industrial Group Co., Ltd., Changzhi, Shanxi Province, 046012 (China); Zhang, Qihuan; Sun, Yunna; Ding, Guifu; Zhao, Xiaolin [National Key Laboratory of Science and Technology on Micro/Nano Fabrication, School of Electronics Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai, 200240 (China)

2016-11-30

Highlights: • The designed cantilever beam attached to the proof mass can endure a larger shock acceleration (∼1000 g order of magnitude) compared to those traditional designs (∼100 g order of magnitude). • Effect of the pulse width on the threshold acceleration, the response time and the contact time is investigated. • A constraint sleeve structure is introduced to lower the off-axis sensitivity. - Abstract: A novel laterally-driven inertial micro-switch with two L-shaped elastic cantilever beams as the movable electrode, which is attached to the proof mass, is proposed in this paper. The advantage of this design is that the contact time of the inertial micro-switch can be prolonged. Meanwhile, the micro-switch can withstand a higher shock than the traditional designs whose cantilever beams are attached to the fixed electrode. The designed inertial micro-switch was simulated and optimized with ANSYS software and fabricated on a quartz substrate by surface micromachining technology. The simulated result demonstrates that the threshold acceleration (a{sub ths}) under stable switch-on state is about 288 g and the contact time is about 198 μs when the pulse width of acceleration loads is 1 ms. At the same time, it indicates that the threshold acceleration, the response time and the contact time of designed micro-switch all increase with the pulse width of acceleration loads. The simulation of impact process in non-sensitive direction shows that the introduced constraint sleeve structure in the novel inertial micro-switch can lower the off-axis sensitivity. The fabricated micro-switch prototype has been tested by a standard dropping hammer system under shock accelerations with various amplitudes and pulse widths. The experimental measurements show that the contact time is about 150 μs when the threshold acceleration is about 288 g. It also indicates that the response time and the contact time both increase with the pulse width, which is consistent with the

Advanced sensor fault detection and isolation for electro-mechanical flight actuators

OpenAIRE

Ossmann, Daniel; van der Linden, Franciscus

2015-01-01

Moving towards the more electric aircraft to be able to replace mechanic, hydraulic and pneumatic components of an aircraft, the aircraft industry calls for new technologies able to support this trend. One of these technologies is the development of advanced electro-mechanical actuators for aircraft control surfaces. Step by step hydraulic actuators are replaced by their electro-mechanical alternatives featuring weight and cost savings. As hydraulic actuators are used for decades by the air...

Comparison of residual stress measurement in thin films using surface micromachining method

International Nuclear Information System (INIS)

He, Q.; Luo, Z.X.; Chen, X.Y.

2008-01-01

Conductive, dielectric, semiconducting, piezoelectric and ferroelectric thin films are extensively used for MEMS/NEMS applications. One of the important parameters of thin films is residual stress. The residual stress can seriously affect the properties, performance and long-term stability of the films. Excessive compressive or tensile stress results in buckling, cracking, splintering and sticking problems. Stress measurement techniques are therefore essential for both process development and process monitoring. Many suggestions for stress measurement in thin films have been made over the past several decades. This paper is concentrated on the in situ stress measurement using surface micromachining techniques to determine the residual stress. The authors review and compare several types of stress measurement methods including buckling technique, rotating technique, micro strain gauge and long-short beam strain sensor

Micro pan-tilter and focusing mechanism; Micro shikakuyo shisen henko kiko

Energy Technology Data Exchange (ETDEWEB)

NONE

2000-03-01

The micro pan-tilter and focusing mechanism can adjust focuses while changing freely the visual axis by using a super small CCD micro camera of 9.2 mm in a diameter times 27 mm in length, and contains a camera control unit (CCU) in this size. Many functions of a camera with a tripod head are concentrated into a size 1/10 of that of conventional cameras. The mechanism has been developed for a micro robot to inspect interior of small pipes in devices such as heat exchangers in a power plant. Future application is expected to medical endoscopes and portable information devices. This mechanism observes forward distant view and side wall short-distance view with the maximum resolution of 20 {mu}m by coordinated operation of three high-torque static power drive motors (with minimum outer diameter of 2.5 mm) fabricated by using the micromachine technology. Auto-focusing is also possible. The hybrid IC built-ion CCU has been realized by using the three-dimensional high-density mounting technology. Part of this research and development is performed under the industrial science technology research and development institution established by the Agency of Industrial Science and Technology of the Ministry of International Trade and Industry. (translated by NEDO)

Fiscal 1996 report on technological results. R and D on micromachine technology; 1996 nendo micromachine gijutsu no kenkyu kaihatsu seika hokokusho

Energy Technology Data Exchange (ETDEWEB)

NONE

1998-03-01

Researches on basic element technology of micromachines are conducted that operate autonomously in a narrow small part in a complicated apparatus or in vivo. The areas of activity are (1) research on micromachine systems, (2) a subminiature liquid synthesizing system, and (3) comprehensive investigation and research. In (1), the researches were carried out on the miniaturization and functional combination of a micro laser catheter and a micro tactile sensor catheter, which are the primary components of a coeliac diagnostic and therapeutic system, a 'micro catheter for cerebral blood vessel/treatment', as a micromachine system in the medical field. In (2), R and D was conducted on a system element technology assuming it contributed to a subminiature liquid synthesizing system capable of preparing various liquids including pharmaceuticals accurately with a trace amount. In (3), examination was made on the application area of a micromachine system with priority given to a medical field and also on technological subjects to be tapped, as well as on the contents of (2), with a device installed for evaluating the operating characteristic of a distribution type fluid actuator as needed for the development. (NEDO)

Omega-X micromachining system

International Nuclear Information System (INIS)

Miller, D.M.

1978-01-01

A micromachining tool system with X- and omega-axes is used to machine spherical, aspherical, and irregular surfaces with a maximum contour error of 100 nonometers (nm) and surface waviness of no more than 0.8 nm RMS. The omega axis, named for the angular measurement of the rotation of an eccentric mechanism supporting one end of a tool bar, enables the pulse increments of the tool toward the workpiece to be as little as 0 to 4.4 nm. A dedicated computer coordinates motion in the two axes to produce the workpiece contour. Inertia is reduced by reducing the mass pulsed toward the workpiece to about one-fifth of its former value. The tool system includes calibration instruments to calibrate the micromachining tool system. Backlash is reduced and flexing decreased by using a rotary table and servomotor to pulse the tool in the omega-axis instead of a ball screw mechanism. A thermally-stabilized spindle roates the workpiece and is driven by a motor not mounted on the micromachining tool base through a torque-smoothing pulley and vibrationless rotary coupling. Abbe offset errors are almost eliminated by tool setting and calibration at spindle center height. Tool contour and workpiece contour are gaged on the machine; this enables the source of machining errors to be determined more readily, because the workpiece is gaged before its shape can be changed by removal from the machine

Three-dimensional micro assembly of a hinged nickel micro device by magnetic lifting and micro resistance welding

International Nuclear Information System (INIS)

Chang, Chun-Wei; Hsu, Wensyang

2009-01-01

The three-dimensional micro assembly of hinged nickel micro devices by magnetic lifting and micro resistance welding is proposed here. By an electroplating-based surface machining process, the released nickel structure with the hinge mechanism can be fabricated. Lifting of the released micro structure to different tilted angles is accomplished by controlling the positions of a magnet beneath the device. An in situ electro-thermal actuator is used here to provide the pressing force in micro resistance welding for immobilizing the tilted structure. The proposed technique is shown to immobilize micro devices at controlled angles ranging from 14° to 90° with respect to the substrate. Design parameters such as the electro-thermal actuator and welding beam width are also investigated. It is found that there is a trade-off in beam width design between large contact pressure and low thermal deformation. Different dominated effects from resistivity enhancement and contact area enlargement during the welding process are also observed in the dynamic resistance curves. Finally, a lifted and immobilized electro-thermal bent-beam actuator is shown to displace upward about 27.7 µm with 0.56 W power input to demonstrate the capability of electrical transmission at welded joints by the proposed 3D micro assembly technique

Surface-micromachined rotatable member having a low-contact-area hub

Science.gov (United States)

Rodgers, M. Steven; Sniegowski, Jeffry J.; Krygowski, Thomas W.

2003-11-18

A surface-micromachined rotatable member formed on a substrate and a method for manufacturing thereof are disclosed. The surface-micromachined rotatable member, which can be a gear or a rotary stage, has a central hub, and an annulus connected to the central hub by an overarching bridge. The hub includes a stationary axle support attached to the substrate and surrounding an axle. The axle is retained within the axle support with an air-gap spacing therebetween of generally 0.3 .mu.m or less. The rotatable member can be formed by alternately depositing and patterning layers of a semiconductor (e.g. polysilicon or a silicon-germanium alloy) and a sacrificial material and then removing the sacrificial material, at least in part. The present invention has applications for forming micromechanical or microelectromechanical devices requiring lower actuation forces, and providing improved reliability.

Surface--micromachined rotatable member having a low-contact-area hub

Science.gov (United States)

Rodgers, M. Steven; Sniegowski, Jeffry J.

2002-01-01

A surface-micromachined rotatable member formed on a substrate and a method for manufacturing thereof are disclosed. The surface-micromachined rotatable member, which can be a gear or a rotary stage, has a central hub, and an annulus connected to the central hub by an overarching bridge. The hub includes a stationary axle support attached to the substrate and surrounding an axle. The axle is retained within the axle support with an air-gap spacing therebetween of generally 0.3 .mu.m or less. The rotatable member can be formed by alternately depositing and patterning layers of a semiconductor (e.g. polysilicon or a silicon-germanium alloy) and a sacrificial material and then removing the sacrificial material, at least in part. The present invention has applications for forming micromechanical or microelectromechanical devices requiring lower actuation forces, and providing improved reliability.

MEMS Reliability: Infrastructure, Test Structures, Experiments, and Failure Modes

Energy Technology Data Exchange (ETDEWEB)

TANNER,DANELLE M.; SMITH,NORMAN F.; IRWIN,LLOYD W.; EATON,WILLIAM P.; HELGESEN,KAREN SUE; CLEMENT,J. JOSEPH; MILLER,WILLIAM M.; MILLER,SAMUEL L.; DUGGER,MICHAEL T.; WALRAVEN,JEREMY A.; PETERSON,KENNETH A.

2000-01-01

The burgeoning new technology of Micro-Electro-Mechanical Systems (MEMS) shows great promise in the weapons arena. We can now conceive of micro-gyros, micro-surety systems, and micro-navigators that are extremely small and inexpensive. Do we want to use this new technology in critical applications such as nuclear weapons? This question drove us to understand the reliability and failure mechanisms of silicon surface-micromachined MEMS. Development of a testing infrastructure was a crucial step to perform reliability experiments on MEMS devices and will be reported here. In addition, reliability test structures have been designed and characterized. Many experiments were performed to investigate failure modes and specifically those in different environments (humidity, temperature, shock, vibration, and storage). A predictive reliability model for wear of rubbing surfaces in microengines was developed. The root causes of failure for operating and non-operating MEMS are discussed. The major failure mechanism for operating MEMS was wear of the polysilicon rubbing surfaces. Reliability design rules for future MEMS devices are established.

Surface micromachined counter-meshing gears discrimination device

Science.gov (United States)

Polosky, Marc A.; Garcia, Ernest J.; Allen, James J.

2000-12-12

A surface micromachined Counter-Meshing Gears (CMG) discrimination device which functions as a mechanically coded lock. Each of two CMG has a first portion of its perimeter devoted to continuous driving teeth that mesh with respective pinion gears. Each EMG also has a second portion of its perimeter devoted to regularly spaced discrimination gear teeth that extend outwardly on at least one of three levels of the CMG. The discrimination gear teeth are designed so as to pass each other without interference only if the correct sequence of partial rotations of the CMG occurs in response to a coded series of rotations from the pinion gears. A 24 bit code is normally input to unlock the device. Once unlocked, the device provides a path for an energy or information signal to pass through the device. The device is designed to immediately lock up if any portion of the 24 bit code is incorrect.

Pt-Si Bifunctional Surfaces for CO and Methanol Electro-Oxidation

DEFF Research Database (Denmark)

Permyakova, Anastasia A.; Han, Binghong; Jensen, Jens Oluf

2015-01-01

and storage. Here we report on Pt-Si bulk samples prepared by arc-melting, for the first time, with high activities toward the electro-oxidation of CO and methanol. Increasing the Si concentration on the surface was correlated with the shifts of onset oxidation potentials to lower values and higher activities...... for CO and methanol electro-oxidation. It is proposed that the reaction on the Pt-Si catalyst could follow a Langmuir-Hinshelwood type of mechanism, where substantially enhanced catalytic activity is attributed to the fine-tuning of the surface Pt-Si atomic structure....

Optimization of design parameters for bulk micromachined silicon membranes for piezoresistive pressure sensing application

International Nuclear Information System (INIS)

Belwanshi, Vinod; Topkar, Anita

2016-01-01

Finite element analysis study has been carried out to optimize the design parameters for bulk micro-machined silicon membranes for piezoresistive pressure sensing applications. The design is targeted for measurement of pressure up to 200 bar for nuclear reactor applications. The mechanical behavior of bulk micro-machined silicon membranes in terms of deflection and stress generation has been simulated. Based on the simulation results, optimization of the membrane design parameters in terms of length, width and thickness has been carried out. Subsequent to optimization of membrane geometrical parameters, the dimensions and location of the high stress concentration region for implantation of piezoresistors have been obtained for sensing of pressure using piezoresistive sensing technique.

Optimization of design parameters for bulk micromachined silicon membranes for piezoresistive pressure sensing application

Science.gov (United States)

Belwanshi, Vinod; Topkar, Anita

2016-05-01

Finite element analysis study has been carried out to optimize the design parameters for bulk micro-machined silicon membranes for piezoresistive pressure sensing applications. The design is targeted for measurement of pressure up to 200 bar for nuclear reactor applications. The mechanical behavior of bulk micro-machined silicon membranes in terms of deflection and stress generation has been simulated. Based on the simulation results, optimization of the membrane design parameters in terms of length, width and thickness has been carried out. Subsequent to optimization of membrane geometrical parameters, the dimensions and location of the high stress concentration region for implantation of piezoresistors have been obtained for sensing of pressure using piezoresistive sensing technique.

Robust Position Control of Electro-mechanical Systems

OpenAIRE

Rong Mei; Mou Chen

2013-01-01

In this work, the robust position control scheme is proposed for the electro-mechanical system using the disturbance observer and backstepping control method. To the external unknown load of the electro-mechanical system, the nonlinear disturbance observer is given to estimate the external unknown load. Combining the output of the developed nonlinear disturbance observer with backstepping technology, the robust position control scheme is proposed for the electro-mechanical system. The stabili...

An Investigation into the Response of a Micro Electro Mechanical Compound Pivot Mirror Using Finite Element Modeling

Energy Technology Data Exchange (ETDEWEB)

GASS, FAWN R.; DOHNER, JEFFREY L.

2002-01-01

This report is a presentation of modeling and simulation work for analyzing three designs of Micro Electro Mechanical (MEM) Compound Pivot Mirrors (CPM). These CPMs were made at Sandia National Laboratories using the SUMMiT{trademark} process. At 75 volts and above, initial experimental analysis of fabricated mirrors showed tilt angles of up to 7.5 degrees for one design, and 5 degrees for the other two. Nevertheless, geometric design models predicted higher tilt angles. Therefore, a detailed study was conducted to explain why lower tilt angles occurred and if design modifications could be made to produce higher tilt angles at lower voltages. This study showed that the spring stiffnesses of the CPMs were too great to allow for desired levels of rotation at lower levels of voltage. To produce these lower stiffnesses, a redesign is needed.

Wafer level packaging of MEMS

International Nuclear Information System (INIS)

Esashi, Masayoshi

2008-01-01

Wafer level packaging plays many important roles for MEMS (micro electro mechanical systems), including cost, yield and reliability. MEMS structures on silicon chips are encapsulated between bonded wafers or by surface micromachining, and electrical interconnections are made from the cavity. Bonding at the interface, such as glass–Si anodic bonding and metal-to-metal bonding, requires electrical interconnection through the lid vias in many cases. On the other hand, lateral electrical interconnections on the surface of the chip are used for bonding with intermediate melting materials, such as low melting point glass and solder. The cavity formed by surface micromachining is made using sacrificial etching, and the openings needed for the sacrificial etching are plugged using deposition sealing methods. Vacuum packaging methods and the structures for electrical feedthrough for the interconnection are discussed in this review. (topical review)

Fabrication of high aspect ratio micro electrode by using EDM

International Nuclear Information System (INIS)

Elsiti, Nagwa Mejid; Noordin, M.Y.; Alkali, Adam Umar

2016-01-01

The electrical discharge machining (EDM) process inherits characteristics that make it a promising micro-machining technique. Micro electrical discharge machining (micro- EDM) is a derived form of EDM, which is commonly used to manufacture micro and miniature parts and components by using the conventional electrical discharge machining fundamentals. Moving block electro discharge grinding (Moving BEDG) is one of the processes that can be used to fabricate micro-electrode. In this study, a conventional die sinker EDM machine was used to fabricate the micro-electrode. Modifications are made to the moving BEDG, which include changing the direction of movements and control gap in one electrode. Consequently current was controlled due to the use of roughing, semi-finishing and finishing parameters. Finally, a high aspect ratio micro-electrode with a diameter of 110.49μm and length of 6000μm was fabricated. (paper)

A manufacturing method for multi-layer polysilicon surface-micromachining technology

Energy Technology Data Exchange (ETDEWEB)

Sniegowski, J.J.; Rodgers, M.S.

1998-01-01

An advanced manufacturing technology which provides multi-layered polysilicon surface micromachining technology for advanced weapon systems is presented. Specifically, the addition of another design layer to a 4 levels process to create a 5 levels process allows consideration of fundamentally new architecture in designs for weapon advanced surety components.

Micro and Nano-Scale Technologies for Cell Mechanics

Directory of Open Access Journals (Sweden)

Mustafa Unal

2014-10-01

Full Text Available Cell mechanics is a multidisciplinary field that bridges cell biology, fundamental mechanics, and micro and nanotechnology, which synergize to help us better understand the intricacies and the complex nature of cells in their native environment. With recent advances in nanotechnology, microfabrication methods and micro-electro-mechanical-systems (MEMS, we are now well situated to tap into the complex micro world of cells. The field that brings biology and MEMS together is known as Biological MEMS (BioMEMS. BioMEMS take advantage of systematic design and fabrication methods to create platforms that allow us to study cells like never before. These new technologies have been rapidly advancing the study of cell mechanics. This review article provides a succinct overview of cell mechanics and comprehensively surveys micro and nano-scale technologies that have been specifically developed for and are relevant to the mechanics of cells. Here we focus on micro and nano-scale technologies, and their applications in biology and medicine, including imaging, single cell analysis, cancer cell mechanics, organ-on-a-chip systems, pathogen detection, implantable devices, neuroscience and neurophysiology. We also provide a perspective on the future directions and challenges of technologies that relate to the mechanics of cells.

Micromachining process – current situation and challenges

Directory of Open Access Journals (Sweden)

Lalakiya Meet Rajeshkumar

2015-01-01

Full Text Available The rapid progress in the scientific innovations and the hunt for the renewable energy increases the urge for producing the bio electronic products, solar cells, bio batteries, nano robots, MEMS, blood less surgical tools which can be possible with the aid of the micromachining. This article helps us to understand the evolution and the challenges faced by the micromachining process. Micro machining is an enabling technology that facilitates component miniaturization and improved performance characteristics. Growing demand for less weight, high accuracy, high precision, meagre lead time, reduced batch size, less human interference are the key drivers for the micromachining than the conventional machining process.

Optically Driven Mobile Integrated Micro-Tools for a Lab-on-a-Chip

Directory of Open Access Journals (Sweden)

Yi-Jui Liu

2013-04-01

Full Text Available This study proposes an optically driven complex micromachine with an Archimedes microscrew as the mechanical power, a sphere as a coupler, and three knives as the mechanical tools. The micromachine is fabricated by two-photon polymerization and is portably driven by optical tweezers. Because the microscrew can be optically trapped and rotates spontaneously, it provides driving power for the complex micro-tools. In other words, when a laser beam focuses on the micromachine, the microscrew is trapped toward the focus point and simultaneously rotates. A demonstration showed that the integrated micromachines are grasped by the optical tweezers and rotated by the Archimedes screw. The rotation efficiencies of the microrotors with and without knives are 1.9 rpm/mW and 13.5 rpm/mW, respectively. The micromachine can also be portably dragged along planed routes. Such Archimedes screw-based optically driven complex mechanical micro-tools enable rotation similar to moving machines or mixers, which could contribute to applications for a biological microfluidic chip or a lab-on-a-chip.

First reliability test of a surface micromachined microengine using SHiMMeR

Energy Technology Data Exchange (ETDEWEB)

Tanner, D.M.; Smith, N.F.; Bowman, D.J. [and others

1997-08-01

The first-ever reliability stress test on surface micromachined microengines developed at Sandia National Laboratories (SNL) has been completed. We stressed 41 microengines at 36,000 RPM and inspected the functionality at 60 RPM. We have observed an infant mortality region, a region of low failure rate (useful life), and no signs of wearout in the data. The reliability data are presented and interpreted using standard reliability methods. Failure analysis results on the stressed microengines are presented. In our effort to study the reliability of MEMS, we need to observe the failures of large numbers of parts to determine the failure modes. To facilitate testing of large numbers of micromachines. The Sandia High Volume Measurement of Micromachine Reliability (SHiMMeR) system has computer controlled positioning and the capability to inspect moving parts. The development of this parallel testing system is discussed in detail.

Method of drying passivated micromachines by dewetting from a liquid-based process

Science.gov (United States)

Houston, Michael R.; Howe, Roger T.; Maboudian, Roya; Srinivasan, Uthara

2000-01-01

A method of fabricating a micromachine includes the step of constructing a low surface energy film on the micromachine. The micromachine is then rinsed with a rinse liquid that has a high surface energy, relative to the low surface energy film, to produce a contact angle of greater than 90.degree. between the low surface energy film and the rinse liquid. This relatively large contact angle causes any rinse liquid on the micromachine to be displaced from the micromachine when the micromachine is removed from the rinse liquid. In other words, the micromachine is dried by dewetting from a liquid-based process. Thus, a separate evaporative drying step is not required, as the micromachine is removed from the liquid-based process in a dry state. The relatively large contact angle also operates to prevent attractive capillary forces between micromachine components, thereby preventing contact and adhesion between adjacent microstructure surfaces. The low surface energy film may be constructed with a fluorinated self-assembled monolayer film. The processing of the invention avoids the use of environmentally harmful, health-hazardous chemicals.

Design and fabrication of a micro parallel mechanism system using MEMS technologies

Science.gov (United States)

Chin, Chi-Te

limitations. Therefore, this research is focusing on silicon-based technology and expects to achieve the design, fabrication and eventually control purpose. The micro-stage mechanism was designed and generated based on the special designed three-layer polysilicon surface micromachining techniques. Afterwards, the proceeding structures were released and an experiment study was performed to demonstrate the feasibility of the proposed devices. In addition, the fabrication challenges, prototyping results, improvement methodology and future work were recommended.

Electro-active bio-films: formation, characterization and mechanisms

International Nuclear Information System (INIS)

Parot, Sandrine

2007-01-01

Some bacteria, which are able to exchange electrons with a conductive material without mediator form on conductive surfaces electro-active bio-films. This bacterial property has been recently discovered (2001). Objectives of this work are to develop electro-active bio-films in various natural environments from indigenous flora, then through complementary electrochemical techniques (chrono-amperometry and cyclic voltammetry), to evaluate electro-activity of isolates coming from so-formed bio-films and to characterize mechanisms of electron transfer between bacteria and materials. First, electro-active bio-films have been developed under chrono-amperometry in garden compost and in water coming from Guyana mangrove. These bio-films were respectively able to use an electrode as electron acceptor (oxidation) or as electron donor (reduction). In compost, results obtained in chrono-amperometry and cyclic voltammetry suggest a two-step electron transfer: slow substrate consumption, then rapid electron transfer between bacteria and the electrode. Thereafter, the ability to reduce oxygen was demonstrated with cyclic voltammetry for facultative aerobic isolates from compost bio-films (Enterobacter spp. and Pseudomonas spp.) and for aerobic isolates obtained from marine electro-active bio-films (Roseobacter spp. in majority). Finally, bio-films inducing current increase in chrono-amperometry were developed in bioreactor with synthetic medium from a pure culture of isolates. Hence, for the first time, electro-activity of several anaerobic strains of Geobacter bremensis isolated from compost bio-films was highlighted. (author) [fr

Characterization of the Young's modulus and residual stresses for a sputtered silicon oxynitride film using micro-structures

International Nuclear Information System (INIS)

Dong, Jian; Du, Ping; Zhang, Xin

2013-01-01

Silicon oxynitride (SiON) is an important material to fabricate micro-electro-mechanical system (MEMS) devices due to its composition-dependent tunability in electronic and mechanical properties. In this work, the SiON film with 41.45% silicon, 32.77% oxygen and 25.78% nitrogen content was deposited by RF magnetron sputtering. Two types of optimized micro-structures including micro-cantilevers and micro-rotating-fingers were designed and fabricated using MEMS surface micromachining technology. The micro-cantilever bending tests were conducted using a nanoindenter to characterize the Young's modulus of the SiON film. Owing to the elimination of the residual stress effect on the micro-cantilever structure, higher accuracy in the Young's modulus was achieved from this technique. With the information of Young's modulus of the film, the residual stresses were characterized from the deflection of the micro-rotating-fingers. This structure was able to locally measure a large range of tensile or compressive residual stresses in a thin film with sufficient sensitivities. The results showed that the Young's modulus of the SiON film was 122 GPa and the residual stresses of the SiON film were 327 MPa in the crystallographic orientation of the wafer and 334 MPa in the direction perpendicular to the crystallographic orientation, both in compression. This work presents a comprehensive methodology to measure the Young's modulus and residual stresses of a thin film with improved accuracy, which is promising for applications in mechanical characterization of MEMS devices. - Highlight: • We measured the Young's modulus and residual stress of SiON film by microstructure. • Micro cantilever structure improved the Young's modulus' measurement accuracy. • We explored the reason for the deviations of residual stress value of SiON film

Direct writing and electro-mechanical characterization of Ag micro-patterns on polymer substrates for flexible electronics

International Nuclear Information System (INIS)

Torres Arango, Maria A.; Cokeley, Anna M.; Beard, Jared J.; Sierros, Konstantinos A.

2015-01-01

There is currently a great interest in developing flexible electrodes. Such components are used in most electronic devices from displays to solar cells to flexible sensors. To date most of them are fabricated using expensive vacuum techniques, and are based on transparent conducting oxides. These oxides are not entirely compatible with flexible substrates under the application of mechanical stresses, due to their brittle nature. Therefore, there is a need to explore novel low-cost, large-area fabrication methods to deposit alternative conducting materials with enhanced electro-mechanical performance. This work focuses on Ag patterns fabricated at low temperatures (below 150 °C) on flexible polyethylene naphthalate utilizing a robotic printing approach. Such lithography-free method minimizes material waste by printing exact amounts of inks on digitally predefined locations. Additionally, it allows a broad feature size range, from a few μm to a few mm, and a variety of ink viscosities for better pattern control. We investigate the synthesis and direct writing of Ag particle-based inks, patterned-on-flex as lines and grids in the μm scale. We report on a high-yield ink synthesis method (~ 61.6%) with controlled particle size. It is found that the electrical resistivity (1.75 ∗ 10"−"4 Ω cm) of the patterns is in the same range with similar particle-based conductive components. The correlation between annealing temperature, microstructural evolution, and electrical performance is established. Also, the optical transmittance of the patterns can be controlled to meet specific application requirements by regulating the substrate surface area covered. Finally, the mechanical behavior under both monotonic and cyclic conditions shows a superior performance compared to brittle counterparts and underlines the potential of such metallic micro-patterns to be utilized in a wide range of flexible electronic applications. It is believed that direct writing of Ag patterns on

Direct writing and electro-mechanical characterization of Ag micro-patterns on polymer substrates for flexible electronics

Energy Technology Data Exchange (ETDEWEB)

Torres Arango, Maria A.; Cokeley, Anna M.; Beard, Jared J.; Sierros, Konstantinos A., E-mail: kostas.sierros@mail.wvu.edu

2015-12-01

There is currently a great interest in developing flexible electrodes. Such components are used in most electronic devices from displays to solar cells to flexible sensors. To date most of them are fabricated using expensive vacuum techniques, and are based on transparent conducting oxides. These oxides are not entirely compatible with flexible substrates under the application of mechanical stresses, due to their brittle nature. Therefore, there is a need to explore novel low-cost, large-area fabrication methods to deposit alternative conducting materials with enhanced electro-mechanical performance. This work focuses on Ag patterns fabricated at low temperatures (below 150 °C) on flexible polyethylene naphthalate utilizing a robotic printing approach. Such lithography-free method minimizes material waste by printing exact amounts of inks on digitally predefined locations. Additionally, it allows a broad feature size range, from a few μm to a few mm, and a variety of ink viscosities for better pattern control. We investigate the synthesis and direct writing of Ag particle-based inks, patterned-on-flex as lines and grids in the μm scale. We report on a high-yield ink synthesis method (~ 61.6%) with controlled particle size. It is found that the electrical resistivity (1.75 ∗ 10{sup −4} Ω cm) of the patterns is in the same range with similar particle-based conductive components. The correlation between annealing temperature, microstructural evolution, and electrical performance is established. Also, the optical transmittance of the patterns can be controlled to meet specific application requirements by regulating the substrate surface area covered. Finally, the mechanical behavior under both monotonic and cyclic conditions shows a superior performance compared to brittle counterparts and underlines the potential of such metallic micro-patterns to be utilized in a wide range of flexible electronic applications. It is believed that direct writing of Ag patterns

Micro thrust and heat generator

Science.gov (United States)

Garcia, E.J.

1998-11-17

A micro thrust and heat generator have a means for providing a combustion fuel source to an ignition chamber of the micro thrust and heat generator. The fuel is ignited by a ignition means within the micro thrust and heat generator`s ignition chamber where it burns and creates a pressure. A nozzle formed from the combustion chamber extends outward from the combustion chamber and tappers down to a narrow diameter and then opens into a wider diameter where the nozzle then terminates outside of said combustion chamber. The pressure created within the combustion chamber accelerates as it leaves the chamber through the nozzle resulting in pressure and heat escaping from the nozzle to the atmosphere outside the micro thrust and heat generator. The micro thrust and heat generator can be microfabricated from a variety of materials, e.g., of polysilicon, on one wafer using surface micromachining batch fabrication techniques or high aspect ratio micromachining techniques (LIGA). 30 figs.

Two Capacitive Micro-Machined Ultrasonic Transducers for Wind Speed Measurement.

Science.gov (United States)

Bui, Gia Thinh; Jiang, Yu-Tsung; Pang, Da-Chen

2016-06-02

This paper presents a new wind speed measurement method using a single capacitive micro-machined ultrasonic transducer (CMUT). The CMUT was arranged perpendicular to the direction of the wind flow, and a reflector was set up a short distance away, facing the CMUT. To reduce the size, weight, cost, and power consumption of conventional ultrasonic anemometers this study proposes two CMUT designs for the measurement of wind speed using either the amplitude of the signal or the time of flight (TOF). Each CMUT with a double array element design can transmit and receive signals in five different operation modes. Experiments showed that the two CMUT designs utilizing the TOF were better than those utilizing the amplitude of the signal for wind speed measurements ranging from 1 m/s to 10 m/s, providing a measurement error of less than 0.2 m/s. These results indicate that the sensitivity of the TOF is independent of the five operation modes.

Micro Electro Discharge Machining for Nonconductive Ceramic Materials

Directory of Open Access Journals (Sweden)

Mohammad Yeakub Ali

2018-03-01

Full Text Available In micro-electro discharge machining (micro-EDM of nonconductive ceramics, material is removed mainly by spalling due to the dominance of alternating thermal load. The established micro-EDM models established for single spark erosion are not applicable for nonconductive ceramics because of random spalling. Moreover, it is difficult to create single spark on a nonconductive ceramic workpiece when the spark is initiated by the assisting electrode. In this paper, theoretical model of material removal rate (MRR as the function of capacitance and voltage is developed for micro-EDM of nonconductive zirconium oxide (ZrO2. It is shown that the charging and discharging duration depend on the capacitance and resistances of the circuit. The number of sparks per unit time is estimated from the single spark duration s derived from heat transfer fundamentals. The model showed that both the capacitance and voltage are significant process parameters where any increase of capacitance and voltage increases the MRR. However, capacitance was found to be the dominating parameter over voltage. As in case of higher capacitances, the creation of a conductive carbonic layer on the machined surface was not stable; the effective window of machining 101 - 103 pF capacitance and 80 - 100 V gap voltage or 10 - 470 pF capacitance and 80 - 110 V gap voltage. This fact was confirmed EDX analysis where the presence of high carbon content was evident. Conversely, the spark was found to be inconsistent using parameters beyond these ranges and consequently insignificant MRR. Nevertheless, the effective number of sparks per second were close to the predicted numbers when machining conductive copper material. In addition, higher percentage of ineffective pulses was observed during the machining which eventually reduced the MRR. In case of validation, average deviations between the predicted and experimental values were found to be around 10%. Finally, micro-channels were machined on

Experimental study of micro-milling mechanism and surface quality of a nickel-based single crystal superalloy

Energy Technology Data Exchange (ETDEWEB)

Gao, Qi; Gong, Yadong; Zhou, Yun Guang; Wen, Xue Long [School of Mechanical Engineering and Automation, Northeastern University, Shenyang (China)

2017-01-15

Micro-milling is widely used as a method for machining of micro-parts with high precision and efficiency. Taking the nickel-based single-crystal superalloy DD98 as the research object, the crystal characteristics of single-crystal materials were analysed, and the removal mechanism of single-crystal micro-milled parts was described. Based on molecular dynamics, a simulation model for nickel-based single-crystal superalloy DD98 micro-milling was established. Based on the response surface method of central composite design, the influences of spindle speed, feed rate, and milling depth on the surface roughness were examined, and a second-order regression model of the DD98 surface roughness was established. Using analysis of variance and the residuals of the model, a significant influence on surface roughness was found in the following order from large to small: Feed rate, spindle speed, and milling depth. Comparisons were conducted between the micro-milling experimental values and the predicted model values for different process parameters. The results show that the model fit is relatively high, and the adaptability is good. Scanning electron microscopy analysis of the micro-milling surfaces was performed to verify the slip and the removal mechanism of single-crystal materials. These results offer a theoretical reference and experimental basis for micro-milling of single-crystal materials.

Experimental Identification of Smartphones Using Fingerprints of Built-In Micro-Electro Mechanical Systems (MEMS

Directory of Open Access Journals (Sweden)

Gianmarco Baldini

2016-06-01

Full Text Available The correct identification of smartphones has various applications in the field of security or the fight against counterfeiting. As the level of sophistication in counterfeit electronics increases, detection procedures must become more accurate but also not destructive for the smartphone under testing. Some components of the smartphone are more likely to reveal their authenticity even without a physical inspection, since they are characterized by hardware fingerprints detectable by simply examining the data they provide. This is the case of MEMS (Micro Electro-Mechanical Systems components like accelerometers and gyroscopes, where tiny differences and imprecisions in the manufacturing process determine unique patterns in the data output. In this paper, we present the experimental evaluation of the identification of smartphones through their built-in MEMS components. In our study, three different phones of the same model are subject to repeatable movements (composing a repeatable scenario using an high precision robotic arm. The measurements from MEMS for each repeatable scenario are collected and analyzed. The identification algorithm is based on the extraction of the statistical features of the collected data for each scenario. The features are used in a support vector machine (SVM classifier to identify the smartphone. The results of the evaluation are presented for different combinations of features and Inertial Measurement Unit (IMU outputs, which show that detection accuracy of higher than 90% is achievable.

An electro-magnetic micromachined actuator monolithically integrated with a vertical shutter for variable optical attenuation

International Nuclear Information System (INIS)

Hung, Shao Hsuan; Hsieh, Hsin-Ta; John Su, Guo-Dung

2008-01-01

The design, fabrication and test results of an electromagnetic-actuated micromachined variable optical attenuator (VOA) are reported in this paper. Optical attenuation is achieved by moving a shutter into the light path between a pair of single mode fiber collimators. The shutter, consisting of a 500 µm × 1200 µm vertical micromirror, is monolithically integrated with an actuation flap. The micromirror was made by tetra-methyl ammonium hydroxide (TMAH) anisotropic wet etching with a sharp edge and a smooth reflecting surface. By arranging fiber collimators in different configurations, the reported VOA can be used as either normally-on or normally-off modes due to its relatively large shutter surface. The insertion loss of the VOA is 0.2 dB and 0.4 dB for normally-on and normally-off modes, respectively. Both optical and mechanical simulation models of the device were discussed, and the theoretical calculations based on these models offered an efficient way to predict the performance of the shutter-type VOA. The controllable attenuation range is approximately 40 dB with a driving voltage less than 0.5 V, and the driving power is less than 2 mW. A response time of 5 ms is achieved by applying proper driving waveform

A 16-bit sigma-delta modulator applied in micro-machined inertial sensors

Science.gov (United States)

Honglin, Xu; Qiang, Fu; Hongna, Liu; Liang, Yin; Pengfei, Wang; Xiaowei, Liu

2014-04-01

A fourth-order low-distortion low-pass sigma-delta (ΣΔ) modulator is presented for micro-machined inertial sensors. The proposed single-loop single-bit feedback modulator is optimized with a feed-forward path to decrease the nonlinearities and power consumption. The IC is implemented in a standard 0.6 μm CMOS technology and operates at a sampling frequency of 3.846 MHz. The chip area is 2.12 mm2 with 23 pads. The experimental results indicate a signal-to-noise ratio (SNR) of 100 dB and dynamic range (DR) of 103 dB at an oversampling rate (OSR) of 128 with the input signal amplitude of -3.88 dBFS at 9.8 kHz; the power consumption is 15 mW at a 5 V supply.

A 16-bit sigma–delta modulator applied in micro-machined inertial sensors

International Nuclear Information System (INIS)

Xu Honglin; Fu Qiang; Liu Hongna; Yin Liang; Wang Pengfei; Liu Xiaowei

2014-01-01

A fourth-order low-distortion low-pass sigma–delta (ΣΔ) modulator is presented for micro-machined inertial sensors. The proposed single-loop single-bit feedback modulator is optimized with a feed-forward path to decrease the nonlinearities and power consumption. The IC is implemented in a standard 0.6 μm CMOS technology and operates at a sampling frequency of 3.846 MHz. The chip area is 2.12 mm 2 with 23 pads. The experimental results indicate a signal-to-noise ratio (SNR) of 100 dB and dynamic range (DR) of 103 dB at an oversampling rate (OSR) of 128 with the input signal amplitude of −3.88 dBFS at 9.8 kHz; the power consumption is 15 mW at a 5 V supply. (semiconductor integrated circuits)

Biological and Mechanical Effects of Micro-Nanostructured Titanium Surface on an Osteoblastic Cell Line In vitro and Osteointegration In vivo.

Science.gov (United States)

Hao, Jingzu; Li, Ying; Li, Baoe; Wang, Xiaolin; Li, Haipeng; Liu, Shimin; Liang, Chunyong; Wang, Hongshui

2017-09-01

Hybrid micro-nanostructure implant surface was produced on titanium (Ti) surface by acid etching and anodic oxidation to improve the biological and mechanical properties. The biological properties of the micro-nanostructure were investigated by simulated body fluid (SBF) soaking test and MC3T3-E1 cell co-culture experiment. The cell proliferation, spreading, and bone sialoprotein (BSP) gene expression were examined by MTT, SEM, and reverse transcription-polymerase chain reaction (RT-PCR), respectively. In addition, the mechanical properties were evaluated by instrumented nanoindentation test and friction-wear test. Furthermore, the effect of the micro-nanostructure surface on implant osteointegration was examined by in vivo experiment. The results showed that the formation of bone-like apatite was accelerated on the micro-nanostructured Ti surface after immersion in simulated body fluid, and the proliferation, spreading, and BSP gene expression of the MC3T3-E1 cells were also upregulated on the modified surface. The micro-nanostructured Ti surface displayed decreased friction coefficient, stiffness value, and Young's modulus which were much closer to those of the cortical bone, compared to the polished Ti surface. This suggested much better mechanical match to the surrounding bone tissue of the micro-nanostructured Ti surface. Furthermore, the in vivo animal experiment showed that after implantation in the rat femora, the micro-nanostructure surface displayed higher bonding strength between bone tissues and implant; hematoxylin and eosin (H&E) staining suggested that much compact osteoid tissue was observed at the interface of Micro-nano-Ti-bone than polished Ti-bone interface after implantation. Based on these results mentioned above, it was concluded that the improved biological and mechanical properties of the micro-nanostructure endowed Ti surface with good biocompatibility and better osteointegration, implying the enlarged application of the micro

Structure optimization and simulation analysis of the quartz micromachined gyroscope

Directory of Open Access Journals (Sweden)

Xuezhong Wu

2014-02-01

Full Text Available Structure optimization and simulation analysis of the quartz micromachined gyroscope are reported in this paper. The relationships between the structure parameters and the frequencies of work mode were analysed by finite element analysis. The structure parameters of the quartz micromachined gyroscope were optimized to reduce the difference between the frequencies of the drive mode and the sense mode. The simulation results were proved by testing the prototype gyroscope, which was fabricated by micro-electromechanical systems (MEMS technology. Therefore, the frequencies of the drive mode and the sense mode can match each other by the structure optimization and simulation analysis of the quartz micromachined gyroscope, which is helpful in the design of the high sensitivity quartz micromachined gyroscope.

Development of a micro-mechanical valve in a novel glaucoma implant.

Science.gov (United States)

Siewert, Stefan; Schultze, Christine; Schmidt, Wolfram; Hinze, Ulf; Chichkov, Boris; Wree, Andreas; Sternberg, Katrin; Allemann, Reto; Guthoff, Rudolf; Schmitz, Klaus-Peter

2012-10-01

This paper describes methods for design, manufacturing and characterization of a micro-mechanical valve for a novel glaucoma implant. The implant is designed to drain aqueous humour from the anterior chamber of the eye into the suprachoroidal space in case of an elevated intraocular pressure (IOP). In contrast to any existing glaucoma drainage device (GDD), the valve mechanism is located in the anterior chamber and there, surrounded by aqueous humour, immune to fibrosis induced failure. For the prevention of hypotony the micro-mechanical valve is designed to open if the physiological pressure difference between the anterior chamber and the suprachoroidal space in the range of 0.8 mmHg to 3.7 mmHg is exceeded. In particular the work includes: (i) manufacturing and morphological characterization of polymer tubing, (ii) mechanical material testing as basis for (iii) the design of micro-mechanical valves using finite element analysis (FEA), (iv) manufacturing of microstent prototypes including micro-mechanical valves by femtosecond laser micromachining and (v) the experimental fluid-mechanical characterization of the manufactured microstent prototypes with regard to valve opening pressure. The considered materials polyurethane (PUR) and silicone (SIL) exhibit low elastic modulus and high extensibility. The unique valve design enables a low opening pressure of micro-mechanical valves. An ideal valve design for PUR and SIL with an experimentally determined opening pressure of 2 mmHg and 3.7 mmHg is identified. The presented valve approach is suitable for the inhibition of hypotony as a major limitation of today's GDD and will potentially improve the minimally invasive treatment of glaucoma.

A Novel Silicon Micromachined Integrated MCM Thermal Management System

Science.gov (United States)

Kazmierczak, M. J.; Henderson, H. T.; Gerner, F. M.

1997-01-01

"Micromachining" is a chemical means of etching three-dimensional structures, typically in single- crystalline silicon. These techniques are leading toward what is coming to be referred to as MEMS (Micro Electro Mechanical Systems), where in addition to the ordinary two-dimensional (planar) microelectronics, it is possible to build three-dimensional n-ticromotors, electrically- actuated raicrovalves, hydraulic systems and much more on the same microchip. These techniques become possible because of differential etching rates of various crystallographic planes and materials used for semiconductor n-ticrofabfication. The University of Cincinnati group in collaboration with Karl Baker at NASA Lewis were the first to form micro heat pipes in silicon by the above techniques. Current work now in progress using MEMS technology is now directed towards the development of the next generation in MCM (Multi Chip Module) packaging. Here we propose to develop a complete electronic thermal management system which will allow densifica6on in chip stacking by perhaps two orders of magnitude. Furthermore the proposed technique will allow ordinary conu-nercial integrated chips to be utilized. Basically, the new technique involves etching square holes into a silicon substrate and then inserting and bonding commercially available integrated chips into these holes. For example, over a 100 1/4 in. by 1 /4 in. integrated chips can be placed on a 4 in. by 4 in. silicon substrate to form a Multi-Chip Module (MCM). Placing these MCM's in-line within an integrated rack then allows for three-diniensional stacking. Increased miniaturization of microelectronic circuits will lead to very high local heat fluxes. A high performance thermal management system will be specifically designed to remove the generated energy. More specifically, a compact heat exchanger with milli / microchannels will be developed and tested to remove the heat through the back side of this MCM assembly for moderate and high

3D Printed Microtransporters: Compound Micromachines for Spatiotemporally Controlled Delivery of Therapeutic Agents.

Science.gov (United States)

Huang, Tian-Yun; Sakar, Mahmut Selman; Mao, Angelo; Petruska, Andrew J; Qiu, Famin; Chen, Xue-Bo; Kennedy, Stephen; Mooney, David; Nelson, Bradley J

2015-11-01

Functional compound micromachines are fabricated by a design methodology using 3D direct laser writing and selective physical vapor deposition of magnetic materials. Microtransporters with a wirelessly controlled Archimedes screw pumping mechanism are engineered. Spatiotemporally controlled collection, transport, and delivery of micro particles, as well as magnetic nanohelices inside microfluidic channels are demonstrated. © 2015 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

Micro-propulsion and micro-combustion; Micropropulsion microcombustion

Energy Technology Data Exchange (ETDEWEB)

Ribaud, Y.; Dessornes, O.

2002-10-01

The AAAF (french space and aeronautic association) organized at Paris a presentation on the micro-propulsion. The first part was devoted to the thermal micro-machines for micro drones, the second part to the micro-combustion applied to micro-turbines. (A.L.B.)

Load monitoring of aerospace structures utilizing micro-electro-mechanical systems for static and quasi-static loading conditions

International Nuclear Information System (INIS)

Martinez, M; Rocha, B; Li, M; Shi, G; Beltempo, A; Rutledge, R; Yanishevsky, M

2012-01-01

The National Research Council Canada (NRC) has worked on the development of structural health monitoring (SHM) test platforms for assessing the performance of sensor systems for load monitoring applications. The first SHM platform consists of a 5.5 m cantilever aluminum beam that provides an optimal scenario for evaluating the ability of a load monitoring system to measure bending, torsion and shear loads. The second SHM platform contains an added level of structural complexity, by consisting of aluminum skins with bonded/riveted stringers, typical of an aircraft lower wing structure. These two load monitoring platforms are well characterized and documented, providing loading conditions similar to those encountered during service. In this study, a micro-electro-mechanical system (MEMS) for acquiring data from triads of gyroscopes, accelerometers and magnetometers is described. The system was used to compute changes in angles at discrete stations along the platforms. The angles obtained from the MEMS were used to compute a second, third or fourth order degree polynomial surface from which displacements at every point could be computed. The use of a new Kalman filter was evaluated for angle estimation, from which displacements in the structure were computed. The outputs of the newly developed algorithms were then compared to the displacements obtained from the linear variable displacement transducers connected to the platforms. The displacement curves were subsequently post-processed either analytically, or with the help of a finite element model of the structure, to estimate strains and loads. The estimated strains were compared with baseline strain gauge instrumentation installed on the platforms. This new approach for load monitoring was able to provide accurate estimates of applied strains and shear loads. (paper)

Micro-gravity Isolation using only Electro-magnetic Actuators

DEFF Research Database (Denmark)

Vinther, D.; Alminde, Lars; Bisgaard, Morten

in the Sixth Student Parabolic Flight Campaign issued by the European Space Agency (ESA). The system consists of six custom made electro magnetic actuators which acts on the isolated platform based on the designed controller and their input from six accelerometers and six infrared position sensors. From......In this paper the design, construction and test of a free floating micro-gravity isolation platform to reduce the acceleration dose on zero gravity experiments on e.g. the International Space Station (ISS) is discussed. During the project a system is specified and constructed whereupon it is tested...

Micro-gravity Isolation using only Electro-magnetic Actuators

DEFF Research Database (Denmark)

Vinther, D.; Alminde, Lars; Bisgaard, Morten

2004-01-01

in the Sixth Student Parabolic Flight Campaign issued by the European Space Agency (ESA). The system consists of six custom made electro magnetic actuators which acts on the isolated platform based on the designed controller and their input from six accelerometers and six infrared position sensors. >From......In this paper the design, construction and test of a free floating micro-gravity isolation platform to reduce the acceleration dose on zero gravity experiments on e.g. the International Space Station (ISS) is discussed. During the project a system is specified and constructed whereupon it is tested...

Micromachined tunable metamaterials: a review

International Nuclear Information System (INIS)

Liu, A Q; Zhu, W M; Tsai, D P; Zheludev, N I

2012-01-01

This paper reviews micromachined tunable metamaterials, whereby the tuning capabilities are based on the mechanical reconfiguration of the lattice and/or the metamaterial element geometry. The primary focus of this review is the feasibility of the realization of micromachined tunable metamaterials via structure reconfiguration and the current state of the art in the fabrication technologies of structurally reconfigurable metamaterial elements. The micromachined reconfigurable microstructures not only offer a new tuning method for metamaterials without being limited by the nonlinearity of constituent materials, but also enable a new paradigm of reconfigurable metamaterial-based devices with mechanical actuations. With recent development in nanomachining technology, it is possible to develop structurally reconfigurable metamaterials with faster tuning speed, higher density of integration and more flexible choice of the working frequencies. (review article)

Surface micromachined fabrication of piezoelectric ain unimorph suspension devices for rf resonator applications

NARCIS (Netherlands)

Saravanan, S.; Saravanan, S.; Berenschot, Johan W.; Krijnen, Gijsbertus J.M.; Elwenspoek, Michael Curt

We report a surface micromachining process for aluminum nitride (AlN) thin films to fabricate piezoelectric unimorph suspension devices for actuator applications. Polysilicon is used as a structural layer. Highly c-axis oriented AlN thin films 1 /spl mu/m thick are deposited by rf reactive

Cryogenically assisted abrasive jet micromachining of polymers

International Nuclear Information System (INIS)

Getu, H; Papini, M; Spelt, J K

2008-01-01

The abrasive jet micromachining (AJM) of elastomers and polymers such as polydimethylsiloxane (PDMS), acrylonitrile butadiene styrene (ABS) and polytetrafluoroethylene (PTFE) for use in micro-fluidic devices was found to be very slow or impossible at room temperature. To enhance the material removal rate in such materials, a stream of liquid nitrogen (LN 2 ) was injected into the abrasive jet, cooling the target to cryogenic temperatures. Erosion rate measurements on the three polymeric materials (PDMS, ABS and PTFE) with and without the use of LN 2 were compared along with the profiles of micromachined channels and holes. It was found that the use of LN 2 cooling caused brittle erosion in PDMS, allowing it to be micromachined successfully. An erosion rate increase was also observed in PTFE and ABS at high and intermediate impact angles. The use of LN 2 also was found to reduce particle embedding

Mechanical and electro-mechanical properties of three-dimensional nanoporous graphene-poly(vinylidene fluoride composites

Directory of Open Access Journals (Sweden)

G. P. Zheng

2016-09-01

Full Text Available Three-dimensional nanoporous graphene monoliths are utilized to prepare graphene-poly(vinylidene fluoride nanocomposites with enhanced mechanical and electro-mechanical properties. Pre-treatment of the polymer (poly(vinylidene fluoride, PVDF with graphene oxides (GOs facilitates the formation of uniform and thin PVDF films with a typical thickness below 100 nm well coated at the graphene nano-sheets. Besides their excellent compressibility, ductility and mechanical strength, the nanoporous graphene-PVDF nanocomposites are found to possess high sensitivity in strain-dependent electrical conductivity. The improved mechanical and electro-mechanical properties are ascribed to the enhanced crystalline β phase in PVDF which possesses piezoelectricity. The mechanical relaxation analyses on the interfaces between graphene and PVDF reveal that the improved mechanical and electro-mechanical properties could result from the interaction between the –C=O groups in the nanoporous graphene and the –CF2 groups in PVDF, which also explains the important role of GOs in the preparation of the graphene-polymer nanocomposites with superior combined mechanical and electro-mechanical properties.

Micromachining with copper lasers

Science.gov (United States)

Knowles, Martyn R. H.; Bell, Andy; Foster-Turner, Gideon; Rutterford, Graham; Chudzicki, J.; Kearsley, Andrew J.

1997-04-01

In recent years the copper laser has undergone extensive development and has emerged as a leading and unique laser for micromachining. The copper laser is a high average power (10 - 250 W), high pulse repetition rate (2 - 32 kHz), visible laser (511 nm and 578 nm) that produces high peak power (typically 200 kW), short pulses (30 ns) and very good beam quality (diffraction limited). This unique set of laser parameters results in exceptional micro-machining in a wide variety of materials. Typical examples of the capabilities of the copper laser include the drilling of small holes (10 - 200 micrometer diameter) in materials as diverse as steel, ceramic, diamond and polyimide with micron precision and low taper (less than 1 degree) cutting and profiling of diamond. Application of the copper laser covers the electronic, aerospace, automotive, nuclear, medical and precision engineering industries.

The micromachined logo of Atomki

International Nuclear Information System (INIS)

Rajta, I.; Szilasi, S.Z.

2006-01-01

Complete text of publication follows. Proton Beam Micromachining, also known as P-beam Writing, is a direct write 3- dimensional lithographic technique. Conventional resist types are PMMA (polymethylmethacrylate), and SU-8 (of MicroChem Corp.); they are positive and negative resists, respectively. In this work we used SU-8, the most common negative resist material. SU-8 was spun on a flat surface, typically Silicon or glass. A direct write proton beam was scanned over an arbitary structure (the Atomki logo can be replaced by any other structure), which produces chain scissioning in the polymer. Post exposure bake (PEB) is usually needed in case of conventional optical lithography, but using protons this bake is done in situ as the ions heat up the sample in vacuum. Subsequently chemical etching takes place, the solvent is available at MicroChem Corp. The schematic diagram of the above described micromachining process is shown on Fig. 1. The irradiation requires a scanning proton microbeam system equipped with suitable beam scanning and blanking facilities. This is available in the Institute, our setup has been upgraded from doublet to triplet focusing system (Oxford Microbeams Ltd.). For scanning we use a DIO card (PCI-6731 of National Instruments), and the IonScan software [1]. Sample preparation was carried out at our 'semi clean' room. This is also where chemical development of the samples and the optical microscopy have been done too. A Zeiss Axio Imager microscope is available (equipped with 5 objective lenses, 4 different contrast methods, transmitted or reflected light illumination). Fig. 2. shows a typical example of the Atomki logo. This is a bright field image, a number of different nice and colourful images can be produced with the other contrast techniques (for more images see the Institute website: http://www.atomki.hu/ ). (author)

Design of a micro-robot with an electro-pneumatic servo-actuator for the intra-pipe inspection

International Nuclear Information System (INIS)

Anthierens, C.

1999-12-01

Micro Electro Mechanical Systems (MEMS) are integrated in many current products and are not only the concern of military defence or medicine. Nowadays micro actuators are diversified by using different kind of energy, and creating different motions. Several applications require small systems to inspect confined and hostile places. Vapour generators in nuclear plants are composed with 3000 to 5000 vertical pipes of 17 mm diameter. These pipes endure high mechanical constraints and have to be inspected to detect eventual cracks. Our study is based on the design, modelling and implementation of a micro-robot enable to move up and carry sensors in these pipes. It moves as an inchworm and then is composed by 2 blocking modules that brace the robot on the pipe sides, and one stretching module that creates a step. This actuator is pneumatic and composed by metal bellows. By this original design, the micro-robot have a good power to volume ratio and thus it can carry a load higher than 1 kg. Its good positioning accuracy is proved with a 90 mm course where the error of positioning is less than 60μm. A PID control law is used to control the robot but state feed back control law is planed. (author)

Deposition of a thin electro-polymerized organic film on iron surface

International Nuclear Information System (INIS)

Lecayon, Gerard

1980-01-01

We use an electrochemical method to prepare a polymerized thin film, obtained from acrylonitrile in a solution of acetonitrile and tetraethylammonium perchlorate. The films are deposited on oxidized iron electrodes, with a surface area varying from a few mm to several cm, their thickness ranges from ten A to thousand A. This result is obtained by controlling the evolution of reactions: duplication, hydrogenation, polymerization which occur during the electrochemical reduction of acrylonitrile. The choice of suitable experimental conditions enhances the polymerization and increases the adherence of the polymer on the electrode. The usual methods of surface studies: S.E.M., A.E.S., S.I.M.S., permit the characterization of the electrode surface and the chemical composition of the deposit films. The molecular structure of polymer, and its evolution under aging or heating was studied by infrared multi-reflection spectroscopy. Very good correlation exists between the electrochemical characteristic: I = f(t), the initial surface state of the electrodes, and the homogeneity of the electro-polymerized films. Diagrams corresponding to mechanisms of different stages of electro-polymerization are proposed. (author) [fr

A micro seismometer based on molecular electronic transducer technology for planetary exploration

International Nuclear Information System (INIS)

Huang, Hai; Tang, Rui; Carande, Bryce; Oiler, Jonathan; Zaitsev, Dmitri; Agafonov, Vadim; Yu, Hongyu

2013-01-01

This letter describes an implementation of micromachined seismometer based on molecular electronic transducer (MET) technology. As opposed to a solid inertial mass, MET seismometer senses the movement of liquid electrolyte relative to fixed electrodes. The employment of micro-electro-mechanical systems techniques reduces the internal size of the sensing cell to 1μm and improves the reproducibility of the device. For operating bias of 600 mV, a sensitivity of 809 V/(m/s 2 ) was measured under acceleration of 400μg(g≡9.81m/s 2 ) at 0.32 Hz. A −115 dB (relative to (m/s 2 )/√(Hz)) noise level at 1 Hz was achieved. This work develops an alternative paradigm of seismic sensing device with small size, high sensitivity, low noise floor, high shock tolerance, and independence of installation angle, which is promising for next generation seismometers for planetary exploration.

Fabrication of surface micromachined ain piezoelectric microstructures and its potential apllication to rf resonators

NARCIS (Netherlands)

Saravanan, S.; Saravanan, S.; Berenschot, Johan W.; Krijnen, Gijsbertus J.M.; Elwenspoek, Michael Curt

2005-01-01

We report on a novel microfabrication method to fabricate aluminum nitride (AlN) piezoelectric microstructures down to 2 microns size by a surface micromachining process. Highly c-axis oriented AlN thin films are deposited between thin Cr electrodes on polysilicon structural layers by rf reactive

Laser Micromachining and Information Discovery Using a Dual Beam Interferometry

Energy Technology Data Exchange (ETDEWEB)

Theppakuttaikomaraswamy, Senthil P. [Iowa State Univ., Ames, IA (United States)

2001-01-01

Lasers have proven to be among the most promising tools for micromachining because they can process features down to the size of the laser wavelength (smaller than 1 micrometer) and they provide a non-contact technology for machining. The demand for incorporating in-situ diagnostics technology into the micromachining environment is driven by the increasing need for producing micro-parts of high quality and accuracy. Laser interferometry can be used as an on-line monitoring tool and it is the aim of this work to enhance the understanding and application of Michelson interferometry principle for the in-situ diagnostics of the machining depth on the sub-micron and micron scales. micromachining is done on two different materials and a comprehensive investigation is done to control the width and depth of the machined feature. To control the width of the feature, laser micromachining is done on copper and a detailed analysis is performed. The objective of this experiment is to make a precision mask for sputtering with an array of holes on it using an Nd:YAG laser of 532 nm wavelength. The diameter of the hole is 50 μm and the spacing between holes (the distance between the centers) is 100 μm. Michelson interferometer is integrated with a laser machining system to control the depth of machining. An excimer laser of 308 nm wavelength is used for micromachining. A He-Ne laser of 632.8 nm wavelength is used as the light source for the interferometer. Interference patterns are created due to the change in the path length between the two interferometer arms. The machined depth information is obtained from the interference patterns on an oscilloscope detected by a photodiode. To compare the predicted depth by the interferometer with the true machining depth, a surface profilometer is used to measure the actual machining depth on the silicon. It is observed that the depths of machining obtained by the surface profile measurement are in accordance with the interferometer

Modeling and analysis of micro-WEDM process of titanium alloy (Ti–6Al–4V using response surface approach

Directory of Open Access Journals (Sweden)

P. Sivaprakasam

2014-12-01

Full Text Available Micro-machining technology is effectively used in modern manufacturing industries. This paper investigates the influence of three different input parameters such as voltage, capacitance and feed rate of micro-wire electrical discharge machining (micro-WEDM performances of material removal rate (MRR, Kerf width (KW and surface roughness (SR using response surface methodology with central composite design (CCD. The experiments are carried out on titanium alloy (Ti–6Al–4V. The machining characteristics are significantly influenced by the electrical and non-electrical parameters in micro-WEDM process. Analysis of variance (ANOVA was performed to find out the significant influence of each factor. The model developed can use a genetic algorithm (GA to determine the optimal machining conditions using multi-objective optimization technique. The optimal machining performance of material removal rate, Kerf width and surface roughness are 0.01802 mm3/min, 101.5 μm and 0.789 μm, respectively, using this optimal machining conditions viz. voltage 100 V, capacitance 10 nF and feed rate 15 μm/s.

Resolving Overlimiting Current Mechanisms in Microchannel-Nanochannel Interface Devices

Science.gov (United States)

Yossifon, Gilad; Leibowitz, Neta; Liel, Uri; Schiffbauer, Jarrod; Park, Sinwook

2015-11-01

We present results demonstrating the space charge-mediated transition between classical, diffusion-limited current and surface-conduction dominant over-limiting currents in a shallow micro-nanochannel device. The extended space charge layer develops at the depleted micro-nanochannel entrance at high current and is correlated with a distinctive maximum in the dc resistance. Experimental results for a shallow surface-conduction dominated system are compared with theoretical models, allowing estimates of the effective surface charge at high voltage to be obtained. Further, we extend the study to microchannels of moderate to large depths where the role of various electro-convection mechanisms becomes dominant. In particular, electro-osmotic of the second kind and electro-osmotic instability (EOI) which competes each other at geometrically heterogeneous (e.g. undulated nanoslot interface, array of nanoslots) nanoslot devices. Also, these effects are also shown to be strongly modulated by the non-ideal permselectivity of the nanochannel.

Thermochemical micro imprinting of single-crystal diamond surface using a nickel mold under high-pressure conditions

Energy Technology Data Exchange (ETDEWEB)

Imoto, Yuji; Yan, Jiwang, E-mail: yan@mech.keio.ac.jp

2017-05-15

Graphical abstract: A Ni mold and thermochemically imprinted microstructures on diamond. - Highlights: • A thermochemical method for micro machining/patterning of diamond is proposed. • Various kinds of microstructures were imprinted on diamond using a Ni mold. • A graphite layer is formed during imprinting which can be removed by acid. • The processing depth depends strongly on pressure and temperature. - Abstract: Single-crystal diamond is an important material for cutting tools, micro electro mechanical systems, optical devices, and semiconductor substrates. However, the techniques for producing microstructures on diamond surface with high efficiency and accuracy have not been established. This paper proposes a thermochemical imprinting method for transferring microstructures from a nickel (Ni) mold onto single-crystal diamond surface. The Ni mold was micro-structured by a nanoindenter and then pressed against the diamond surface under high temperature and pressure in argon atmosphere. Results show that microstructures on the Ni mold were successfully transferred onto the diamond surface, and their depth increased with both pressure and temperature. Laser micro-Raman spectroscopy, transmission electron microscopy (TEM) and electron energy loss spectroscopy (EELS) analyses indicate that a graphite layer was formed over the contact area between diamond and Ni during pressing, and after washing by a mixed acid, the graphite layer could be completely removed. This study demonstrated the feasibility of a cost-efficient fabrication method for large-area microstructures on single-crystal diamond.

Micro- and nanostructured electro-active polymer actuators as smart muscles for incontinence treatment

International Nuclear Information System (INIS)

Osmani, Bekim; Töpper, Tino; Weiss, Florian M.; Leung, Vanessa; Müller, Bert; Deschenaux, Christian; Nohava, Jiri

2015-01-01

Treatments of severe incontinence are currently based on purely mechanical systems that generally result in revision after three to five years. Our goal is to develop a prototype acting in a natural-analogue manner as artificial muscle, which is based on electro-active polymers. Dielectric actuators have outstanding performances including millisecond response times, mechanical strains of more than 10 % and power to mass densities similar to natural muscles. They basically consist of polymer films sandwiched between two compliant electrodes. The incompressible but elastic polymer film transduces the electrical energy into mechanical work according to the Maxwell pressure. Available polymer films are micrometers thick and voltages as large as kV are necessary to obtain 10 % strain. For medical implants, polymer films should be nanometer thin to realize actuation below 48 V. The metallic electrodes have to be stretchable to follow the strain of 10 % and remain conductive. Recent results on the stress/strain behavior of anisotropic EAP-cantilevers have shown dependencies on metal electrode preparation. We have investigated tunable anisotropic micro- and nanostructures for metallic electrodes. They show a preferred actuation direction with improved stress-strain behavior. The bending of the cantilever has been characterized by the laser beam deflection method. The impact of the electrode on the effective Young's Modulus is measured using an Ultra Nanoindentation Tester with an integrated reference system for soft polymer surfaces. Once ten thousand layers of nanometer-thin EAP actuators are available, devices beyond the envisioned application will flood the market

Micro- and nanostructured electro-active polymer actuators as smart muscles for incontinence treatment

Energy Technology Data Exchange (ETDEWEB)

Osmani, Bekim, E-mail: bekim.osmani@unibas.ch, E-mail: tino.toepper@unibas.ch; Töpper, Tino, E-mail: bekim.osmani@unibas.ch, E-mail: tino.toepper@unibas.ch; Weiss, Florian M., E-mail: vanessa.leung@unibas.ch, E-mail: bert.mueller@unibas.ch; Leung, Vanessa, E-mail: vanessa.leung@unibas.ch, E-mail: bert.mueller@unibas.ch; Müller, Bert, E-mail: vanessa.leung@unibas.ch, E-mail: bert.mueller@unibas.ch [Biomaterials Science Center, University of Basel, c/o University Hospital, 4031 Basel (Switzerland); Deschenaux, Christian, E-mail: jiri.nohava@anton-paar.com; Nohava, Jiri, E-mail: jiri.nohava@anton-paar.com [Anton Paar TriTec SA, Rue de la Gare 4, Galileo Center, 2034 Peseux (Switzerland)

2015-02-17

Treatments of severe incontinence are currently based on purely mechanical systems that generally result in revision after three to five years. Our goal is to develop a prototype acting in a natural-analogue manner as artificial muscle, which is based on electro-active polymers. Dielectric actuators have outstanding performances including millisecond response times, mechanical strains of more than 10 % and power to mass densities similar to natural muscles. They basically consist of polymer films sandwiched between two compliant electrodes. The incompressible but elastic polymer film transduces the electrical energy into mechanical work according to the Maxwell pressure. Available polymer films are micrometers thick and voltages as large as kV are necessary to obtain 10 % strain. For medical implants, polymer films should be nanometer thin to realize actuation below 48 V. The metallic electrodes have to be stretchable to follow the strain of 10 % and remain conductive. Recent results on the stress/strain behavior of anisotropic EAP-cantilevers have shown dependencies on metal electrode preparation. We have investigated tunable anisotropic micro- and nanostructures for metallic electrodes. They show a preferred actuation direction with improved stress-strain behavior. The bending of the cantilever has been characterized by the laser beam deflection method. The impact of the electrode on the effective Young's Modulus is measured using an Ultra Nanoindentation Tester with an integrated reference system for soft polymer surfaces. Once ten thousand layers of nanometer-thin EAP actuators are available, devices beyond the envisioned application will flood the market.

3D capacitive tactile sensor using DRIE micromachining

Science.gov (United States)

Chuang, Chiehtang; Chen, Rongshun

2005-07-01

This paper presents a three dimensional micro capacitive tactile sensor that can detect normal and shear forces which is fabricated using deep reactive ion etching (DRIE) bulk silicon micromachining. The tactile sensor consists of a force transmission plate, a symmetric suspension system, and comb electrodes. The sensing character is based on the changes of capacitance between coplanar sense electrodes. High sensitivity is achieved by using the high aspect ratio interdigital electrodes with narrow comb gaps and large overlap areas. The symmetric suspension mechanism of this sensor can easily solve the coupling problem of measurement and increase the stability of the structure. In this paper, the sensor structure is designed, the capacitance variation of the proposed device is theoretically analyzed, and the finite element analysis of mechanical behavior of the structures is performed.

Electro-Thermal-Mechanical Simulation Capability Final Report

International Nuclear Information System (INIS)

White, D

2008-01-01

This is the Final Report for LDRD 04-ERD-086, 'Electro-Thermal-Mechanical Simulation Capability'. The accomplishments are well documented in five peer-reviewed publications and six conference presentations and hence will not be detailed here. The purpose of this LDRD was to research and develop numerical algorithms for three-dimensional (3D) Electro-Thermal-Mechanical simulations. LLNL has long been a world leader in the area of computational mechanics, and recently several mechanics codes have become 'multiphysics' codes with the addition of fluid dynamics, heat transfer, and chemistry. However, these multiphysics codes do not incorporate the electromagnetics that is required for a coupled Electro-Thermal-Mechanical (ETM) simulation. There are numerous applications for an ETM simulation capability, such as explosively-driven magnetic flux compressors, electromagnetic launchers, inductive heating and mixing of metals, and MEMS. A robust ETM simulation capability will enable LLNL physicists and engineers to better support current DOE programs, and will prepare LLNL for some very exciting long-term DoD opportunities. We define a coupled Electro-Thermal-Mechanical (ETM) simulation as a simulation that solves, in a self-consistent manner, the equations of electromagnetics (primarily statics and diffusion), heat transfer (primarily conduction), and non-linear mechanics (elastic-plastic deformation, and contact with friction). There is no existing parallel 3D code for simulating ETM systems at LLNL or elsewhere. While there are numerous magnetohydrodynamic codes, these codes are designed for astrophysics, magnetic fusion energy, laser-plasma interaction, etc. and do not attempt to accurately model electromagnetically driven solid mechanics. This project responds to the Engineering R and D Focus Areas of Simulation and Energy Manipulation, and addresses the specific problem of Electro-Thermal-Mechanical simulation for design and analysis of energy manipulation systems

The micro-mechanisms of failure of nodular cast iron

Directory of Open Access Journals (Sweden)

Alan Vaško

2014-12-01

Full Text Available The contribution deals with a comparison of the micro-mechanisms of failure of nodular cast irons at static, impact and fatigue stress. Several specimens of ferrite-pearlitic nodular cast irons with different content of ferrite in a matrix were used for metallographic analysis, mechanical tests and micro-fractographic analysis. Mechanical properties were found by static tensile test, impact bending test and fatigue tests. The micro-fractographic analysis was made with use of scanning electron microscope VEGA II LMU on fracture surfaces of the specimens fractured by these mechanical and fatigue tests. Fracture surfaces of analysed specimens are characteristic of mixed mode of fracture. Micro-mechanism of failure of nodular cast irons is dependent on the method of stress.

On non-linear dynamics of a coupled electro-mechanical system

DEFF Research Database (Denmark)

Darula, Radoslav; Sorokin, Sergey

2012-01-01

Electro-mechanical devices are an example of coupled multi-disciplinary weakly non-linear systems. Dynamics of such systems is described in this paper by means of two mutually coupled differential equations. The first one, describing an electrical system, is of the first order and the second one...... excitation. The results are verified using a numerical model created in MATLAB Simulink environment. Effect of non-linear terms on dynamical response of the coupled system is investigated; the backbone and envelope curves are analyzed. The two phenomena, which exist in the electro-mechanical system: (a......, for mechanical system, is of the second order. The governing equations are coupled via linear and weakly non-linear terms. A classical perturbation method, a method of multiple scales, is used to find a steadystate response of the electro-mechanical system exposed to a harmonic close-resonance mechanical...

Study of ablation on surfaces of nuclear-use metals irradiated with Femtosecond laser

International Nuclear Information System (INIS)

Nogueira, Alessandro F.; Samad, Ricardo E.; Vieira Junior, Nilson D.; Rossi, Wagner de

2017-01-01

The use of ultrashort pulsed lasers is an alternative for micro-machining in metal surfaces, with diverse applications in several industrial areas, such as aeronautics, aerospace, naval, nuclear, among others, where there is a growing concern with reliability in service. In this work, micro-machining were performed on titanium surfaces using femtosecond ultrashort pulses. Such a process resulted in minimal heat transfer to the material, thus avoiding and surface deformation of the titanium plate and the formation of resolidified material in the ablated region, which are drawbacks present in the use of the long pulsed keyed laser of the order of nanoseconds. Three types of micro-machining were performed, with variations in the distances between the machined lines. It was also verified that the wettability increases when there is an increase in the distance between machined lines. Finally, in order to change the surface with minimal removal of material, it has been found that the use of ultra-short pulse lasers provide great benefits for the integrity of the ablated material. This initial study is the starting point for the study of other metals, such as Maraging Steels and Zircaloy that will be the target of future work. (author)

Study of ablation on surfaces of nuclear-use metals irradiated with Femtosecond laser

Energy Technology Data Exchange (ETDEWEB)

Nogueira, Alessandro F.; Samad, Ricardo E.; Vieira Junior, Nilson D.; Rossi, Wagner de, E-mail: alessandro.nogueira@usp.br, E-mail: resamad@ipen.br [Centro Tecnologico da Marinha em Sao Paulo (CTMSP), Sorocaba, SP (Brazil); Faculdade de Engenharia de Sorocaba (FACENS), Ipero, SP (Brazil); Instituto de Pesquisas Energeticas e Nucleares (IPEN/CNEN-SP), Sao Paulo, SP (Brazil)

2017-11-01

The use of ultrashort pulsed lasers is an alternative for micro-machining in metal surfaces, with diverse applications in several industrial areas, such as aeronautics, aerospace, naval, nuclear, among others, where there is a growing concern with reliability in service. In this work, micro-machining were performed on titanium surfaces using femtosecond ultrashort pulses. Such a process resulted in minimal heat transfer to the material, thus avoiding and surface deformation of the titanium plate and the formation of resolidified material in the ablated region, which are drawbacks present in the use of the long pulsed keyed laser of the order of nanoseconds. Three types of micro-machining were performed, with variations in the distances between the machined lines. It was also verified that the wettability increases when there is an increase in the distance between machined lines. Finally, in order to change the surface with minimal removal of material, it has been found that the use of ultra-short pulse lasers provide great benefits for the integrity of the ablated material. This initial study is the starting point for the study of other metals, such as Maraging Steels and Zircaloy that will be the target of future work. (author)

An adaptive compensation algorithm for temperature drift of micro-electro-mechanical systems gyroscopes using a strong tracking Kalman filter.

Science.gov (United States)

Feng, Yibo; Li, Xisheng; Zhang, Xiaojuan

2015-05-13

We present an adaptive algorithm for a system integrated with micro-electro-mechanical systems (MEMS) gyroscopes and a compass to eliminate the influence from the environment, compensate the temperature drift precisely, and improve the accuracy of the MEMS gyroscope. We use a simplified drift model and changing but appropriate model parameters to implement this algorithm. The model of MEMS gyroscope temperature drift is constructed mostly on the basis of the temperature sensitivity of the gyroscope. As the state variables of a strong tracking Kalman filter (STKF), the parameters of the temperature drift model can be calculated to adapt to the environment under the support of the compass. These parameters change intelligently with the environment to maintain the precision of the MEMS gyroscope in the changing temperature. The heading error is less than 0.6° in the static temperature experiment, and also is kept in the range from 5° to -2° in the dynamic outdoor experiment. This demonstrates that the proposed algorithm exhibits strong adaptability to a changing temperature, and performs significantly better than KF and MLR to compensate the temperature drift of a gyroscope and eliminate the influence of temperature variation.

An Adaptive Compensation Algorithm for Temperature Drift of Micro-Electro-Mechanical Systems Gyroscopes Using a Strong Tracking Kalman Filter

Directory of Open Access Journals (Sweden)

Yibo Feng

2015-05-01

Full Text Available We present an adaptive algorithm for a system integrated with micro-electro-mechanical systems (MEMS gyroscopes and a compass to eliminate the influence from the environment, compensate the temperature drift precisely, and improve the accuracy of the MEMS gyroscope. We use a simplified drift model and changing but appropriate model parameters to implement this algorithm. The model of MEMS gyroscope temperature drift is constructed mostly on the basis of the temperature sensitivity of the gyroscope. As the state variables of a strong tracking Kalman filter (STKF, the parameters of the temperature drift model can be calculated to adapt to the environment under the support of the compass. These parameters change intelligently with the environment to maintain the precision of the MEMS gyroscope in the changing temperature. The heading error is less than 0.6° in the static temperature experiment, and also is kept in the range from 5° to −2° in the dynamic outdoor experiment. This demonstrates that the proposed algorithm exhibits strong adaptability to a changing temperature, and performs significantly better than KF and MLR to compensate the temperature drift of a gyroscope and eliminate the influence of temperature variation.

Impact load-induced micro-structural damage and micro-structure associated mechanical response of concrete made with different surface roughness and porosity aggregates

International Nuclear Information System (INIS)

Erdem, Savaş; Dawson, Andrew Robert; Thom, Nicholas Howard

2012-01-01

The relationship between the nature of micro damage under impact loading and changes in mechanical behavior associated with different microstructures is studied for concretes made with two different coarse aggregates having significant differences mainly in roughness and porosity — sintered fly ash and uncrushed gravel. A range of techniques including X-ray diffraction, digital image analysis, mercury porosimetry, X-ray computed tomography, laser surface profilometry and scanning electron microscopy were used to characterize the aggregates and micro-structures. The concrete prepared with lightweight aggregates was stronger in compression than the gravel aggregate concrete due to enhanced hydration as a result of internal curing. In the lightweight concrete, it was deduced that an inhomogeneous micro-structure led to strain incompatibilities and consequent localized stress concentrations in the mix, leading to accelerated failure. The pore structure, compressibility, and surface texture of the aggregates are of paramount importance for the micro-cracking growth.

Polyimide and Metals MEMS Multi-User Processes

KAUST Repository

Arevalo, Arpys

2016-11-01

The development of a polyimide and metals multi-user surface micro-machining process for Micro-electro-mechanical Systems (MEMS) is presented. The process was designed to be as general as possible, and designed to be capable to fabricate different designs on a single silicon wafer. The process was not optimized with the purpose of fabricating any one specific device but can be tweaked to satisfy individual needs depending on the application. The fabrication process uses Polyimide as the structural material and three separated metallization layers that can be interconnected depending on the desired application. The technology allows the development of out-of-plane compliant mechanisms, which can be combined with six variations of different physical principles for actuation and sensing on a single processed silicon wafer. These variations are: electrostatic motion, thermal bimorph actuation, capacitive sensing, magnetic sensing, thermocouple-based sensing and radio frequency transmission and reception.

Si Micro-turbine by Proton BeamWriting and Porous Silicon Micromachining

International Nuclear Information System (INIS)

Rajta, I.; Szilasi, S.Z.; Fekete, Z.

2008-01-01

Complete text of publication follows. A 3D Si micro-turbine characterized by high aspect ratio vertical walls was formed by the combination of proton beam writing (PBW) and subsequent selective porous Si (PS) etching. Crystal damages generated by the implanted protons result in increased resistivity, thereby limit or even prevent the current to flow through the implanted area during electrochemical etching. Characteristic feature of the proposed process is that the shape of the micro electromechanical (MEMS) components is defined by two implantation energies. A higher energy is applied for defining the housing of the device while the lower energy is used to write the moving components. The implantation energies were selected such as to result appropriate difference between the two projected ranges, thereby providing structures with different height after development. The thickness of the walls of the moving component and the isotropic etching profile of the electrochemical PS formation was also taken into consideration. The electrochemical etching is driven until the sacrificial PS layer completely under etches the moving components, but the etch-front does not reach the bottom of the housing. Therefore, the dissolution of PS results in a ready-to-operate device with a released moving component embedded in the cavity of the housing. The operation of the encapsulated device fabricated by the two-energy implantation is successfully demonstrated (Fig. 1). Rotation speed of the device is estimated in the range of thousands rpm, however, further analysis of the novel structure optimized for performance and MEMS compatible assembly will be done and precise characteristics will be determined by adequate optical read-out method. The feasibility of Proton Beam Writing combined with Porous Si Micromachining and conventional Si processing steps was successfully demonstrated by fabricating Si microturbine chip. The aligned, two-energy proton beam implantation can provide high

Channeling-based collimators for generation of microbeams produced by silicon micromachining technology

International Nuclear Information System (INIS)

Guidi, V.; Antonini, A.; Milan, E.; Ronzoni, A.; Martinelli, G.; Biryukov, V.M.; Chesnokov, Yu.A.

2006-01-01

The growing interest on micro-beams in recent years and the combined development of channeling technology in high-energy physics have opened the way to new concepts for micro-beams devices. Silicon micromachining technology is here applied to manufacture micro-collimators in inexpensive and feasible ways. Both dry and wet etchings can be employed for the purpose, though the latter technique appears to be cheaper and easier. Two designs for micro-collimator devices have been considered and preliminary samples have been produced accordingly

Achieving precision in high density batch mode micro-electro-discharge machining

International Nuclear Information System (INIS)

Richardson, Mark T; Gianchandani, Yogesh B

2008-01-01

This paper reports a parametric study of batch mode micro-electro-discharge machining (µEDM) of high density features in stainless steel. Lithographically fabricated copper tools with single cross, parallel line and 8 × 8 circle/square array features of 5–100 µm width and 5–75 µm spacing were used to quantify trends in machining tolerance and the impact of debris accumulation. As the tool feature density is increased, debris accumulation effects begin to dominate, eventually degrading both tool and workpiece. Two independent techniques for mitigating this debris buildup are separately investigated. The first is a passivation coating which suppresses spurious discharges triggered from the sidewalls of the machining tool. By this method, the mean tool wear rate decreases from a typical of about 34% to 1.7% and machining non-uniformity reduces from 4.9 µm to 1.1 µm across the workpiece. The second technique involves a two-step machining process that enhances the hydrodynamic removal of machining debris compared to standard methods. This improves surface and edge finish, machining time and tool wear

Micromachined silicon acoustic delay line with improved structural stability and acoustic directivity for real-time photoacoustic tomography

Science.gov (United States)

Cho, Young; Kumar, Akhil; Xu, Song; Zou, Jun

2017-03-01

Recent studies have shown that micromachined silicon acoustic delay lines can provide a promising solution to achieve real-time photoacoustic tomography without the need for complex transducer arrays and data acquisition electronics. However, as its length increases to provide longer delay time, the delay line becomes more vulnerable to structural instability due to reduced mechanical stiffness. In addition, the small cross-section area of the delay line results in a large acoustic acceptance angle and therefore poor directivity. To address these two issues, this paper reports the design, fabrication, and testing of a new silicon acoustic delay line enhanced with 3D printed polymer micro linker structures. First, mechanical deformation of the silicon acoustic delay line (with and without linker structures) under gravity was simulated by using finite element method. Second, the acoustic crosstalk and acoustic attenuation caused by the polymer micro linker structures were evaluated with both numerical simulation and ultrasound transmission testing. The result shows that the use of the polymer micro linker structures significantly improves the structural stability of the silicon acoustic delay lines without creating additional acoustic attenuation and crosstalk. In addition, a new tapered design for the input terminal of the delay line was also investigate to improve its acoustic directivity by reducing the acoustic acceptance angle. These two improvements are expected to provide an effective solution to eliminate current limitations on the achievable acoustic delay time and out-of-plane imaging resolution of micromachined silicon acoustic delay line arrays.

An experimental analysis of process parameters to manufacture micro-channels in AISI H13 tempered steel by laser micro-milling

Science.gov (United States)

Teixidor, D.; Ferrer, I.; Ciurana, J.

2012-04-01

This paper reports the characterization of laser machining (milling) process to manufacture micro-channels in order to understand the incidence of process parameters on the final features. Selection of process operational parameters is highly critical for successful laser micromachining. A set of designed experiments is carried out in a pulsed Nd:YAG laser system using AISI H13 hardened tool steel as work material. Several micro-channels have been manufactured as micro-mold cavities varying parameters such as scanning speed (SS), pulse intensity (PI) and pulse frequency (PF). Results are obtained by evaluating the dimensions and the surface finish of the micro-channel. The dimensions and shape of the micro-channels produced with laser-micro-milling process exhibit variations. In general the use of low scanning speeds increases the quality of the feature in both surface finishing and dimensional.

Enhancing structural integrity of adhesive bonds through pulsed laser surface micro-machining

KAUST Repository

Diaz, Edwin Hernandez

2015-01-01

of different kinds of heterogeneous surface properties that may replicate this behavior and the mechanisms at work. In order to do this, we used pulsed laser ablation on copper substrates (CuZn40) aiming to increase adhesion for bonding. A Yb-fiber laser

Accuracy of depth of cut in micro milling operations

DEFF Research Database (Denmark)

Bissacco, Giuliano

since the magnitude of the cutting forces involved is reduced), which make mechanical micromachining by use of miniaturized tools troublesome or even impossible. This study deals with the use of a conventional 3 axis vertical milling machine equipped with a high speed attached spindle for micro milling...

Electro-Mechanical Systems for Extreme Space Environments

Science.gov (United States)

Mojarradi, Mohammad M.; Tyler, Tony R.; Abel, Phillip B.; Levanas, Greg

2011-01-01

Exploration beyond low earth orbit presents challenges for hardware that must operate in extreme environments. The current state of the art is to isolate and provide heating for sensitive hardware in order to survive. However, this protection results in penalties of weight and power for the spacecraft. This is particularly true for electro-mechanical based technology such as electronics, actuators and sensors. Especially when considering distributed electronics, many electro-mechanical systems need to be located in appendage type locations, making it much harder to protect from the extreme environments. The purpose of this paper to describe the advances made in the area of developing electro-mechanical technology to survive these environments with minimal protection. The Jet Propulsion Lab (JPL), the Glenn Research Center (GRC), the Langley Research Center (LaRC), and Aeroflex, Inc. over the last few years have worked to develop and test electro-mechanical hardware that will meet the stringent environmental demands of the moon, and which can also be leveraged for other challenging space exploration missions. Prototype actuators and electronics have been built and tested. Brushless DC actuators designed by Aeroflex, Inc have been tested with interface temperatures as low as 14 degrees Kelvin. Testing of the Aeroflex design has shown that a brushless DC motor with a single stage planetary gearbox can operate in low temperature environments for at least 120 million cycles (measured at motor) if long life is considered as part of the design. A motor control distributed electronics concept developed by JPL was built and operated at temperatures as low as -160 C, with many components still operational down to -245 C. Testing identified the components not capable of meeting the low temperature goal of -230 C. This distributed controller is universal in design with the ability to control different types of motors and read many different types of sensors. The controller

A novel differential frequency micro-gyroscope

KAUST Repository

Nayfeh, A. H.; Abdel-Rahman, E. M.; Ghommem, M.

2013-01-01

We present a frequency-domain method to measure angular speeds using electrostatic micro-electro-mechanical system actuators. Towards this end, we study a single-axis gyroscope made of a micro-cantilever and a proof-mass coupled to two fixed

Fabrication of piezoresistive microcantilever using surface micromachining technique for biosensors

Energy Technology Data Exchange (ETDEWEB)

Na, Kwang-Ho [Department of Electrical Engineering and Nano-Bio Research Center, Myongji University, Yongin, Gyeonggido 449-728 (Korea, Republic of); Kim, Yong-Sang [Department of Electrical Engineering and Nano-Bio Research Center, Myongji University, Yongin, Gyeonggido 449-728 (Korea, Republic of); Kang, C.J. [Department of Physics and Nano-Bio Research Center, Myongji University, San38-2 Namdong, Yongin, Gyeonggido 449-728 (Korea, Republic of)]. E-mail: cjkang@mju.ac.kr

2005-11-15

A microcantilever-based biosensor with piezoresistor has been fabricated using surface micromachining technique, which is cost effective and simplifies a fabrication procedure. In order to evaluate the characteristics of the cantilever, the cystamine terminated with thiol was covalently immobilized on the gold-coated side of the cantilever and glutaraldehyde that would be bonded with amine group in the cystamine was injected subsequently. This process was characterized by measuring the deflection of the cantilever in real time monitoring. Using a piezoresistive read-out and a well-known optical beam deflection method as well, the measurement of deflection was carried out. The sensitivity of piezoresistive method is good enough compared with that of optical beam deflection method.

Electrostatic mechanism of shaping the wave micro-relief on the surface of a semiconductor, sputtered by an ion beam

International Nuclear Information System (INIS)

Grigor'ev, A.I.

2000-01-01

The effect of the electric field formed due to the surface charging, is not accounted for in the weakly-developed theoretical models for the ordered micro-relief formation on the surface of a semiconductor under the impact of an ion beam. It is shown, that the problem on modeling the physical mechanism of forming the ordered wave micro-relief on the semiconductor surface under the impact of a high-energy ion beam may be interpreted as an electrostatic one [ru

UV laser micromachining of ceramic materials: formation of columnar topographies

International Nuclear Information System (INIS)

Oliveira, V.; Vilar, R.; Conde, O.

2001-01-01

Laser machining is increasingly appearing as an alternative for micromachining of ceramics. Using ceramic materials using excimer lasers can result in smooth surfaces or in the formation of cone-like or columnar topography. Potential applications of cone-shaped or columnar surface topography include, for example, light trapping in anti-reflection coatings and improvement of adhesion bonding between ceramic materials. In this communication results of a comparative study of surface topography change during micromachining of several ceramic materials with different ablation behaviors are reported. (orig.)

Fabrication of 3D electro-thermal micro actuators in silica glass by femtosecond laser wet etch and microsolidics

Science.gov (United States)

Li, Qichao; Shan, Chao; Yang, Qing; Chen, Feng; Bian, Hao; Hou, Xun

2017-02-01

This paper demonstrates a novel electro-thermal micro actuator's design, fabrication and device tests which combine microfluidic technology and microsolidics process. A three-dimensional solenoid microchannel with high aspect ratio is fabricated inside the silica glass by an improved femtosecond laser wet etch (FLWE) technology, and the diameter of the spiral coil is only 200 μm. Molten alloy (Bi/In/Sn/Pb) with high melting point is injected into the three-dimensional solenoid microchannel inside the silica glass , then it solidifys and forms an electro-thermal micro actuator. The device is capable of achieving precise temperature control and quick response, and can also be easily integrated into MEMS, sensors and `lab on a chip' (LOC) platform inside the fused silica substrate.

Fiscal 1997 report on technological results. R and D on micromachine technology (Development of micro-factory technology); 1997 nendo micromachine gijutsu no kenkyu kaihatsu seika hokokusho. Microfactory gijutsu kaihatsu

Energy Technology Data Exchange (ETDEWEB)

NONE

1998-03-01

Activities are conducted in search of a micromachine system in which devices and equipment relating to machining, assembly, transportation, inspection, etc., in use for a manufacturing process are integrated in a narrow space, for the purpose of conserving energy through the miniaturization of the process of manufacturing small industrial products. With the activities in the two fields of (1) R and D of systematization technology (experimental system for micro fabrication/assembly) and (2) comprehensive investigation and research, examination on detailed specification for the experimental system was carried out, as were the examination of element technologies, element device operating experiments, technological investigation, etc.. In (1), sophistication of the element technologies was contrived that were required for realizing each experimental system, while the detailed specification of each experimental system was decided. Further, a part of the element devices was experimentally manufactured, with the basic functions verified. In (2), research studies were compiled on radio interference for example in the case where various devices were integrated and highly densified through the formation of a micro-factory; also compiled was a joint research with Agency of Industrial Science and Technology, a research conducted for the purpose of building the conception of the micro-factory. (NEDO)

A thermal-driven silicon micro xy-stage integrated with piezoresistive sensors for nano-positioning

International Nuclear Information System (INIS)

Choi, Young-Soo; Zhang, Yan; Lee, Dong-Weon

2012-01-01

This paper describes a novel micro xy-stage, driven by double-hot arm horizontal thermal micro-actuators integrated with a piezoresistive sensor (PS) for low-voltage operation and precise control. This micro xy-stage structure is linked with chevron beams and optimized to amplify the displacement generated by the micro-actuators that provide a pull force to the movable platform. The PS employed for in situ displacement detection and feedback control is fabricated at the base of a cold arm, which minimizes the influence of temperature change induced by electro-thermal heating. The micro xy-stage structure is defined through the use of a simple micromachining process, released by backside wet etching with a special tool. For an input power of approximately 44 mW, each chevron actuator provides about 16 µm and the total displacement of the platform is close to 32 µm. The sensitivity of the PS is better than 1 mV µm −1 , obtained from the amplified voltage output of the Wheatstone bridge circuit. The potential applications of the proposed micro xy-stage lie in micro- or nano-manipulation, as well as the positioning of ultra-small objects in nanotechnology. (paper)

The micro turbine: the MIT example; La micro turbine: l'exemple du MIT

Energy Technology Data Exchange (ETDEWEB)

Ribaud, Y. [Office National d' Etudes et de Recherches Aerospatiales (ONERA-DEFA), 92 - Chatillon (France)

2001-10-01

The micro turbine study began a few years ago at the MIT, with the participation of specialists from different fields. The purpose is the development of a MEMS (micro electro mechanical systems) based, 1 cm in diameter, micro gas turbine. Potential applications are devoted to micro drone propulsion, electric power generation for portable power sources in order to replace heavy Lithium batteries, satellite motorization, the surface distributed power for boundary suction on plane wings. The manufacturing constraints at such small scales lead to 2-D extruded shapes. The physical constraints stem from viscous effects and from limitations given by 2-D geometry. The time scales are generally shorter than for conventional machines. Otherwise the material properties are better at such length scales. Transposition from conventional turbomachinery laws is no more applicable and new design methods must be established. The present paper highlights the project progress and the technology breakthroughs. (author)

Micromachining and dicing of sapphire, gallium nitride and micro LED devices with UV copper vapour laser

International Nuclear Information System (INIS)

Gu, E.; Jeon, C.W.; Choi, H.W.; Rice, G.; Dawson, M.D.; Illy, E.K.; Knowles, M.R.H.

2004-01-01

Gallium nitride (GaN) and sapphire are important materials for fabricating photonic devices such as high brightness light emitting diodes (LEDs). These materials are strongly resistant to wet chemical etching and also, low etch rates restrict the use of dry etching. Thus, to develop alternative high resolution processing and machining techniques for these materials is important in fabricating novel photonic devices. In this work, a repetitively pulsed UV copper vapour laser (255 nm) has been used to machine and dice sapphire, GaN and micro LED devices. Machining parameters were optimised so as to achieve controllable machining and high resolution. For sapphire, well-defined grooves 30 μm wide and 430 μm deep were machined. For GaN, precision features such as holes on a tens of micron length scale have been fabricated. By using this technique, compact micro LED chips with a die spacing 100 and a 430 μm thick sapphire substrate have been successfully diced. Measurements show that the performances of LED devices are not influenced by the UV laser machining. Our results demonstrate that the pulsed UV copper vapour laser is a powerful tool for micromachining and dicing of photonic materials and devices

Anti-wetting Cu/Cr coating with micro-posts array structure fabricated by electrochemical approaches

International Nuclear Information System (INIS)

Zhou, Yufeng; Hang, Tao; Li, Feng; Li, Ming

2013-01-01

Microposts structured Cu/Cr multilayer coating was prepared by a simple two-step approach combining electroless and electro deposition. Surface morphologies of the as-prepared Cu/Cr multilayer coating characterized by field emission scanning electron microscopy show that this multilayer coating exhibits micro-posts arrayed structure with a layer of Cr uniformly covering the circular conical surface of Cu micro-cones array. The wettability test shows that the contact angle of Cu/Cr multilayer surface with water drop can be greater than 140° by optimizing the electrodeposition time of Cr. The mechanism of hydrophobicity of both the micro-cones arrayed and micro-posts arrayed structures was briefly discussed by comparing two different wetting modes. Due to its good anti-wetting property and unique structure, the micro-posts arrayed Cu/Cr multilayer coating is expected for extensive practical applications.

Micro flexible robot hand using electro-conjugate fluid

Science.gov (United States)

Ueno, S.; Takemura, K.; Yokota, S.; Edamura, K.

2013-12-01

An electro-conjugate fluid (ECF) is a kind of functional fluid, which produces a flow (ECF flow) when subjected to high DC voltage. Since it only requires a tiny electrode pair in micrometer size in order to generate the ECF flow, the ECF is a promising micro fluid pressure source. This study proposes a novel micro robot hand using the ECF. The robot hand is mainly composed of five flexible fingers and an ECF flow generator. The flexible finger is made of silicone rubber having several chambers in series along its axis. When the chambers are depressurized, the chambers deflate resulting in making the actuator bend. On the other hand, the ECF flow generator has a needle-ring electrode pair inside. When putting the ECF flow generator into the ECF and applying voltage of 6.0 kV to the electrode pair, we can obtain the pressure of 33.1 kPa. Using the components mentioned above, we developed the ECF robot hand. The height, the width and the mass of the robot hand are 45 mm, 40 mm and 5.2 g, respectively. Since the actuator is flexible, the robot hand can grasp various objects with various shapes without complex controller.

Design of a micro-robot with an electro-pneumatic servo-actuator for the intra-pipe inspection; Conception d'un micro robot a actionneur asservi electropneumatique pour l'inspection intratubulaire

Energy Technology Data Exchange (ETDEWEB)

Anthierens, C

1999-12-01

Micro Electro Mechanical Systems (MEMS) are integrated in many current products and are not only the concern of military defence or medicine. Nowadays micro actuators are diversified by using different kind of energy, and creating different motions. Several applications require small systems to inspect confined and hostile places. Vapour generators in nuclear plants are composed with 3000 to 5000 vertical pipes of 17 mm diameter. These pipes endure high mechanical constraints and have to be inspected to detect eventual cracks. Our study is based on the design, modelling and implementation of a micro-robot enable to move up and carry sensors in these pipes. It moves as an inchworm and then is composed by 2 blocking modules that brace the robot on the pipe sides, and one stretching module that creates a step. This actuator is pneumatic and composed by metal bellows. By this original design, the micro-robot have a good power to volume ratio and thus it can carry a load higher than 1 kg. Its good positioning accuracy is proved with a 90 mm course where the error of positioning is less than 60{mu}m. A PID control law is used to control the robot but state feed back control law is planed. (author)

Modeling and identification of induction micromachines in microelectromechanical systems applications

Energy Technology Data Exchange (ETDEWEB)

Lyshevski, S.E. [Purdue University at Indianapolis (United States). Dept. of Electrical and Computer Engineering

2002-11-01

Microelectromechanical systems (MEMS), which integrate motion microstructures, radiating energy microdevices, controlling and signal processing integrated circuits (ICs), are widely used. Rotational and translational electromagnetic based micromachines are used in MEMS as actuators and sensors. Brushless high performance micromachines are the preferable choice in different MEMS applications, and therefore, synchronous and induction micromachines are the best candidates. Affordability, good performance characteristics (efficiency, controllability, robustness, reliability, power and torque densities etc.) and expanded operating envelopes result in a strong interest in the application of induction micromachines. In addition, induction micromachines can be easily fabricated using surface micromachining and high aspect ratio fabrication technologies. Thus, it is anticipated that induction micromachines, controlled using different control algorithms implemented using ICs, will be widely used in MEMS. Controllers can be implemented using specifically designed ICs to attain superior performance, maximize efficiency and controllability, minimize losses and electromagnetic interference, reduce noise and vibration, etc. In order to design controllers, the induction micromachine must be modeled, and its mathematical model parameters must be identified. Using microelectromechanics, nonlinear mathematical models are derived. This paper illustrates the application of nonlinear identification methods as applied to identify the unknown parameters of three phase induction micromachines. Two identification methods are studied. In particular, nonlinear error mapping technique and least squares identification are researched. Analytical and numerical results, as well as practical capabilities and effectiveness, are illustrated, identifying the unknown parameters of a three phase brushless induction micromotor. Experimental results fully support the identification methods. (author)

Micromachined silicon seismic accelerometer development

Energy Technology Data Exchange (ETDEWEB)

Barron, C.C.; Fleming, J.G.; Montague, S. [and others

1996-08-01

Batch-fabricated silicon seismic transducers could revolutionize the discipline of seismic monitoring by providing inexpensive, easily deployable sensor arrays. Our ultimate goal is to fabricate seismic sensors with sensitivity and noise performance comparable to short-period seismometers in common use. We expect several phases of development will be required to accomplish that level of performance. Traditional silicon micromachining techniques are not ideally suited to the simultaneous fabrication of a large proof mass and soft suspension, such as one needs to achieve the extreme sensitivities required for seismic measurements. We have therefore developed a novel {open_quotes}mold{close_quotes} micromachining technology that promises to make larger proof masses (in the 1-10 mg range) possible. We have successfully integrated this micromolding capability with our surface-micromachining process, which enables the formation of soft suspension springs. Our calculations indicate that devices made in this new integrated technology will resolve down to at least sub-{mu}G signals, and may even approach the 10{sup -10} G/{radical}Hz acceleration levels found in the low-earth-noise model.

Micro-mechanisms of Surface Defects Induced on Aluminum Alloys during Plastic Deformation at Elevated Temperatures

Science.gov (United States)

Gali, Olufisayo A.

Near-surface deformed layers developed on aluminum alloys significantly influence the corrosion and tribological behavior as well as reduce the surface quality of the rolled aluminum. The evolution of the near-surface microstructures induced on magnesium containing aluminum alloys during thermomechanical processing has been investigated with the aim generating an understanding of the influence of individual forming parameters on its evolution and examine the microstructure of the roll coating induced on the mating steel roll through material transfer during rolling. The micro-mechanisms related to the various features of near-surface microstructure developed during tribological conditions of the simulated hot rolling process were identified. Thermomechanical processing experiments were performed with the aid of hot rolling (operating temperature: 550 to 460 °C, 4, 10 and 20 rolling pass schedules) and hot forming (operating temperature: 350 to 545 °C, strain rate: 4 x 10-2 s-1) tribo-simulators. The surface, near-surface features and material transfer induced during the elevated temperature plastic deformation were examined and characterized employing optical interferometry, SEM/EDS, FIB and TEM. Near-surface features characterized on the rolled aluminum alloys included; cracks, fractured intermetallic particles, aluminum nano-particles, oxide decorated grain boundaries, rolled-in oxides, shingles and blisters. These features were related to various individual rolling parameters which included, the work roll roughness, which induced the formation of shingles, rolling marks and were responsible for the redistribution of surface oxide and the enhancements of the depth of the near-surface damage. The enhanced stresses and strains experienced during rolling were related to the formation and propagation of cracks, the nanocrystalline structure of the near-surface layers and aluminum nano-particles. The mechanism of the evolution of the near-surface microstructure were

Development of an opto-fluidic micro-system dedicated to chemical analysis in a nuclear environment

Energy Technology Data Exchange (ETDEWEB)

Geoffray, F.; Canto, F.; Couston, L. [CEA, Centre de Marcoule, Nuclear Energy Division, RadioChemistry and Processes Department, SERA/LAMM, F-30207 Bagnols-sur-Ceze (France); Allenet, T.; Bucci, D.; Broquin, J.E. [IMEP-LaHC, Universite de Grenoble Alpes, UMR 5130 CNRS, Minatec-Grenoble-INP, CS 50257, 38016 Grenoble (France); Jardinier, E. [CEA, Centre de Marcoule, Nuclear Energy Division, RadioChemistry and Processes Department, SERA/LAMM, F-30207 Bagnols-sur-Ceze (France); IMEP-LaHC, Universite de Grenoble Alpes, UMR 5130 CNRS, Minatec-Grenoble-INP, CS 50257, 38016 Grenoble (France)

2016-07-01

Micromachining techniques enable the fabrication of innovative lab-on-a-chip. Following the trend in chemical and biological analysis, the use of microsystems also appears compelling in the nuclear industry. The volume reduction of radioactive solutions is especially attractive in order to reduce the workers radiation exposition in the context of off-line analysis in spent nuclear fuel reprocessing plants. We hence present the development of an opto-fluidic sensor combining micro-fluidic channels for fluid transportation and integrated optics for detection. With the aim of achieving automated microanalysis with reduced response time the sensor is made compatible with a commercial micro-fluidic holder. Therefore the chip is connected to computer controlled pumps and electro-valves thanks to capillary tubing. In this paper we emphasis on the fluid handling capacities of the opto-fluidic sensor. (authors)

Microfluidic System Simulation Including the Electro-Viscous Effect

Science.gov (United States)

Rojas, Eileen; Chen, C. P.; Majumdar, Alok

2007-01-01

This paper describes a practical approach using a general purpose lumped-parameter computer program, GFSSP (Generalized Fluid System Simulation Program) for calculating flow distribution in a network of micro-channels including electro-viscous effects due to the existence of electrical double layer (EDL). In this study, an empirical formulation for calculating an effective viscosity of ionic solutions based on dimensional analysis is described to account for surface charge and bulk fluid conductivity, which give rise to electro-viscous effect in microfluidics network. Two dimensional slit micro flow data was used to determine the model coefficients. Geometry effect is then included through a Poiseuille number correlation in GFSSP. The bi-power model was used to calculate flow distribution of isotropically etched straight channel and T-junction microflows involving ionic solutions. Performance of the proposed model is assessed against experimental test data.

Electrical and mechanical characterization of nanoscale-layered cellulose-based electro-active paper.

Science.gov (United States)

Yun, Gyu-Young; Yun, Ki-Ju; Kim, Joo-Hyung; Kim, Jaehwan

2011-01-01

In order to understand the electro-mechanical behavior of piezoelectric electro active paper (EAPap), the converse and direct piezoelectric characterization of cellulose EAPap was studied and compared. A delay between the electrical field and the induced strain of EAPap was observed due to the inner nano-voids or the localized amorphous regions in layer-by-layered structure to capture or hold the electrical charges and remnant ions. The linear relation between electric field and induced strain is also observed. The electro-mechanical performance of EAPap is discussed in detail in this paper.

Water transport mechanisms across inorganic membranes in rad waste treatment by electro dialysis

International Nuclear Information System (INIS)

Andalaft, E.; Labayru, R.

1992-01-01

The work described in this paper deals with effects and mechanisms of water transport across an inorganic membrane, as related to some studied on the concentration of caesium, strontium, plutonium and other cations of interest to radioactive waste treatment. Several different water transport mechanisms are analysed and assessed as to their individual contribution towards the total transference of water during electro-dialysis using inorganic membranes. Water transfer assisted by proton jump mechanism, water of hydration transferred along with the ions, water related to thermo-osmotic effect, water transferred by concentration gradient and water transferred electrolytically under zeta potential surface charge drive are some of the different mechanism discussed. (author)

Nano-opto-electro-mechanical systems

Science.gov (United States)

Midolo, Leonardo; Schliesser, Albert; Fiore, Andrea

2018-01-01

A new class of hybrid systems that couple optical, electrical and mechanical degrees of freedom in nanoscale devices is under development in laboratories worldwide. These nano-opto-electro-mechanical systems (NOEMS) offer unprecedented opportunities to control the flow of light in nanophotonic structures, at high speed and low power consumption. Drawing on conceptual and technological advances from the field of optomechanics, they also bear the potential for highly efficient, low-noise transducers between microwave and optical signals, in both the classical and the quantum domains. This Perspective discusses the fundamental physical limits of NOEMS, reviews the recent progress in their implementation and suggests potential avenues for further developments in this field.

A novel hybrid surface micromachined segmented mirror for large aperture laser applications

Science.gov (United States)

Li, Jie; Chen, Haiqing; Yu, Hongbin

2006-07-01

A novel hybrid surface micromachined segmented mirror array is described. This device is capable of scaling to large apertures for correcting time-varying aberrations in laser applications. Each mirror is composed of bottom electrode, support part, and mirror plate, in which a T-shaped beam structure is used to support the mirror plate. It can provide mirror with vertical movement and rotation around two horizontal axes. The test results show that the maximum deflection along the vertical direction of the mirror plate is 2 microns, while the rotation angles around x and y axes are +-2.3 deg. and +-1.45 deg., respectively.

Chemically Functionalized Arrays Comprising Micro and Nano-Etro-Mechanizal Systems for Reliable and Selective Characterization of Tank Waste

International Nuclear Information System (INIS)

Sepaniak, Michael J.

2008-01-01

Innovative technology of sensory and selective chemical monitoring of hazardous wastes present in storage tanks are of continued importance to the environment. This multifaceted research program exploits the unique characteristics of micro and nano-fabricated cantilever-based, micro-electro-mechanical systems (MEMES) and nano-electro-mechanical systems (NEMS) in chemical sensing. Significant progress was made in tasks that were listed in the work plan for DOE EMSP project 'Hybrid Micro-Electro-Mechanical Systems for Highly Reliable and Selective Characterization of Tank Waste'. These tasks are listed below in modified form followed by the report on progress. (1) Deposit chemically selective phases on model MEMS devices with nanostructured surface layers to identify optimal technological approaches. (2) Monitor mechanical (deflection) and optical (SERS) responses of the created MEMS to organic and inorganic species in aqueous environments. (3) Explore and compare different approaches to immobilization of selective phases on the thermal detectors. (4) Demonstrate improvements in selectivity and sensitivity to model pollutants due to implemented technologies of nanostructuring and multi-mode read-out. (5) Demonstrate detection of different analytes on a single hybrid MEMS (6) Implement the use of differential pairs of cantilever sensors (coated and reference) with the associated detector electronics which is expected to have an enhanced sensitivity with a low-noise low-drift response. (7) Development of methods to create differential arrays and test effectiveness at creating distinctive differential responses.

Arrayed architectures for multi-stage Si-micromachined high-flow Knudsen pumps

International Nuclear Information System (INIS)

Qin, Yutao; An, Seungdo; Gianchandani, Yogesh B

2015-01-01

This paper reports an evaluation and a comparison of two architectures for implementing Si-micromachined high-flow Knudsen pumps. Knudsen pumps, which operate on the principle of thermal transpiration, have been shown to have great promise for micro-scale gas phase fluidic systems such as micro gas chromatographs. Simultaneously achieving both a high flow rate and adequate blocking pressure has been a persistent challenge, which is addressed in this work by combining multiple pumps in series and addressing the resulting challenges in thermal management. The basic building block is a Si-micromachined pump with  ≈100 000 parallel channels in a 4 mm  ×  6 mm footprint. In the primary approach, multiple pump stages are stacked vertically with interleaved Si-micromachined spacers. A stacked 4-stage Knudsen pump has a form factor of 10 mm  ×  8 mm  ×  6 mm. In an alternate approach, multiple stages are arranged in a planar array. The experimental results demonstrate multiplication of the output pressure head with the number of stages, while the flow rate is maintained. For example, a stacked 4-stage Knudsen pump with 8 W power operated at atmospheric pressure provided a blocking pressure of 0.255 kPa, which was 3.6  ×  of that provided by a single-stage pump with 2 W power; while both provided a  ≈  30 sccm maximum flow rate. The performance can be customized for practical applications such as micro gas chromatography. (paper)

Handling of micro objects: investigation of mechanical gripper functional surfaces

DEFF Research Database (Denmark)

Gegeckaite, Asta; Hansen, Hans Nørgaard; De Chiffre, Leonardo

2007-01-01

between the micro object and the gripper do not allow simple picking and releasing of the object. This effect can be overcome by modifying the functional surface of the gripper. The functional surface of the gripper was modified by different machining techniques. The results of this investigation...

Minimizing stress in large-area surface micromachined perforated membranes with slits

International Nuclear Information System (INIS)

Ghaderi, M; Ayerden, N P; De Graaf, G; Wolffenbuttel, R F

2015-01-01

This paper presents the effectiveness of both design and fabrication techniques for avoiding the rupturing or excessive bending of perforated membranes after release in surface micromachining. Special lateral designs of arrays of slits in the membrane were investigated for a maximum yield at a given level of residual stress. Process parameters were investigated and optimized for minimum residual stress in multilayer thin-film membranes. A 2 µm thick sacrificial TEOS layer and a structural membrane that is composed of silicon nitride and polysilicon layers in the stack is the basis of this study. The effect of sharp corners on the local stress in membranes was investigated, and structures are proposed that reduce these effects, maximizing the yield at a given level of residual stress. The effects of perforation and slits were studied both theoretically and using finite element analysis. While the overall effect of perforation is negligible in typical MEMS structures, an optimum design for the slits reduces the von Mises stress considerably as compared to sharp corners. The fabrication process was also investigated and optimized for the minimum residual stress of both the layers within the stack and the complete layer stack. The main emphasis of this work is on placing a stress-compensating layer on the wafer backside and simultaneously removing it during the surface micromachining, as this has been found to be the most effective method to reduce the overall stress in a stack of layers after sacrificial etching. Implementation of a stress compensating layer reduced the total residual stress from 200 MPa compressive into almost 60 MPa, tensile. Even though a particular structure was studied here, the employed methods are expected to be applicable to similar MEMS design problems. (paper)

Fabrication of micro-prominences on PTFE surface using proton beam writing

Energy Technology Data Exchange (ETDEWEB)

Kitamura, Akane, E-mail: ogawa.akane@jaea.go.jp [Department of Advanced Radiation Technology, Takasaki Advanced Radiation Research Institute, Japan Atomic Energy Agency, 1233 Watanuki-Machi, Takasaki, Gunma 370-1292 (Japan); Satoh, Takahiro; Koka, Masashi [Department of Advanced Radiation Technology, Takasaki Advanced Radiation Research Institute, Japan Atomic Energy Agency, 1233 Watanuki-Machi, Takasaki, Gunma 370-1292 (Japan); Kobayashi, Tomohiro [Advanced Science Institute, RIKEN, 2-1 Hirosawa, Wako-shi, Saitama 350-0198 (Japan); Kamiya, Tomihiro [Department of Advanced Radiation Technology, Takasaki Advanced Radiation Research Institute, Japan Atomic Energy Agency, 1233 Watanuki-Machi, Takasaki, Gunma 370-1292 (Japan)

2013-07-01

Polytetrafluoroethylene (PTFE) is a typical fluoropolymer and it has several desirable technological properties such as electrical insulation, solid lubrication etc. However, the conventional microstructuring methods have not been well applied to PTFE due to its chemical inertness. Some effective micromachining using synchrotron radiation or ion beam irradiation has been reported. In this study, we create micro-prominences by raising the original surface using proton beam writing (PBW) without chemical etching. A conical prominence was formed by spiral drawing from the center with a 3 MeV proton beam. The body was porous, and the bulk PTFE below the prominence changed to fragmented structures. With decreasing writing speed, the prominence became taller but the height peaked. The prominence gradually reduced in size after the speed reached the optimum value. We expect that these porous projections with high aspect ratio will be versatile in medical fields and microelectromechanical systems (MEMS) technology.

Analytical Solution of Electro-Osmotic Peristalsis of Fractional Jeffreys Fluid in a Micro-Channel

Directory of Open Access Journals (Sweden)

Xiaoyi Guo

2017-11-01

Full Text Available The electro-osmotic peristaltic flow of a viscoelastic fluid through a cylindrical micro-channel is studied in this paper. The fractional Jeffreys constitutive model, including the relaxation time and retardation time, is utilized to describe the viscoelasticity of the fluid. Under the assumptions of long wavelength, low Reynolds number, and Debye-Hückel linearization, the analytical solutions of pressure gradient, stream function and axial velocity are explored in terms of Mittag-Leffler function by Laplace transform method. The corresponding solutions of fractional Maxwell fluid and generalized second grade fluid are also obtained as special cases. The numerical analysis of the results are depicted graphically, and the effects of electro-osmotic parameter, external electric field, fractional parameters and viscoelastic parameters on the peristaltic flow are discussed.

Erosion resistant anti-ice surfaces generated by ultra short laser pulses

NARCIS (Netherlands)

Del Cerro, D.A.; Römer, G.R.B.E.; Huis in't Veld, A.J.

2010-01-01

Wetting properties of a wide range of materials can be modified by accurate laser micromachining with ultra short laser pulses. Controlling the surface topography in a micro and sub-micrometer scale allows the generation of water-repellent surfaces, which remain dry and prevent ice accumulation

Design of a micro-robot with an electro-pneumatic servo-actuator for the intra-pipe inspection; Conception d'un micro robot a actionneur asservi electropneumatique pour l'inspection intratubulaire

Energy Technology Data Exchange (ETDEWEB)

Anthierens, C

1999-12-01

Micro Electro Mechanical Systems (MEMS) are integrated in many current products and are not only the concern of military defence or medicine. Nowadays micro actuators are diversified by using different kind of energy, and creating different motions. Several applications require small systems to inspect confined and hostile places. Vapour generators in nuclear plants are composed with 3000 to 5000 vertical pipes of 17 mm diameter. These pipes endure high mechanical constraints and have to be inspected to detect eventual cracks. Our study is based on the design, modelling and implementation of a micro-robot enable to move up and carry sensors in these pipes. It moves as an inchworm and then is composed by 2 blocking modules that brace the robot on the pipe sides, and one stretching module that creates a step. This actuator is pneumatic and composed by metal bellows. By this original design, the micro-robot have a good power to volume ratio and thus it can carry a load higher than 1 kg. Its good positioning accuracy is proved with a 90 mm course where the error of positioning is less than 60{mu}m. A PID control law is used to control the robot but state feed back control law is planed. (author)

Electro-Mechanical Response and Engineering Properties of Piezocomposite with Imperfect Interface

Directory of Open Access Journals (Sweden)

Tippayaphalapholgul Rattanan

2016-01-01

Full Text Available Composites of piezoelectric materials are widely use in practical applications such as nondestructive testing devices, smart adaptive structures and medical devices. A thorough understanding of coupled electro-elastic response and properties of piezocomposite are crucial for the development and design of piezoelectric composite materials used in advanced applications. The micromechanics analysis is employed in this paper to determine the response and engineering properties of the piezocomposite. A mechanical imperfect interface bonding between piezoelectric inclusion and polymer matrix is taken into consideration in the analysis. The micromechanics analysis is based on the Boundary Element Method (BEM together with the periodic micro-field micromechanics theory. A selected set of numerical results is presented to investigate the influence of volume ratio and interface bonding condition on effective piezocomposite material coefficients and portray basic features of coupled electroelastic response within the domain of piezocomposite unit cell.

Report on achievements in fiscal 1999. Research and development of micro-machine technologies (development of micro-factory technologies); 1999 nendo micro machine gijutsu no kenkyu kaihatsu seika hokokusho. Micro factory gijutsu kaihatsu

Energy Technology Data Exchange (ETDEWEB)

NONE

2000-03-01

With an objective to achieve energy saving by micronizing the manufacturing processes of small industrial products, this research and development is intended to establish technologies to realize a micro-machine system, in which devices for processing, assembly, transportation and inspection used in the manufacturing processes are unified and incorporated in narrow spaces. Fiscal 1999 has performed, on the items of (1) research and development of the systematizing technologies and (2) comprehensive surveys and researches, with respect to the development of the first prototype system, and fabrication on the trial basis of devices to be mounted on the second prototype system, and discussions on further functional enhancement of the different devices. As a result in the research of the systematizing technology, the first prototype system was developed, that unifies the base unit fabricated in fiscal 1998, the electrolysis processing device, the fluid feeding device, the micro-arms, the coating device, the transportation device, and the environment recognizing device. The basic performances of the individual devices on the first prototype system were verified. Based on the result of this function verification, optimal design and fabrication on the trial basis of the devices mounted in the second prototype system were performed, and discussions were given on the further function enhancement in each functional device. (NEDO)

Uncertainty and sensitivity analysis of electro-mechanical impedance based SHM system

International Nuclear Information System (INIS)

Rosiek, M; Martowicz, A; Uhl, T

2010-01-01

The paper deals with the application of uncertainty and sensitivity analysis performed for FE simulations for electro-mechanical impedance based SHM system. The measurement of electro-mechanical impedance allows to follow changes of mechanical properties of monitored construction. Therefore it can be effectively applied to conclude about presence of damage. Coupled FE simulations have been carried out for simultaneous consideration of both structural dynamics and piezoelectric properties of a simple beam with bonded transducer. Several indexes have been used to assess the damage growth. In the paper the results obtained with both deterministic and stochastic simulations are shown and discussed. First, the relationship between size of introduced damage and its indexes has been studied. Second, ranges of variation of selected model properties have been assumed to find relationships between them and damage indexes. The most influential parameters have been found. Finally, the overall propagation of considered uncertainty has been assessed and related histograms plotted to discuss effectiveness and robustness of tested damage indexes based on the measurement of electro-mechanical impedance.

Global chaos synchronization of electro-mechanical gyrostat systems via variable substitution control

International Nuclear Information System (INIS)

Chen Yun; Wu Xiaofeng; Liu Zhong

2009-01-01

This paper studies global synchronization of non-autonomous chaotic electro-mechanical gyrostat systems via variable substitution control. A master-slave non-autonomous synchronization scheme with variable substitution control is mathematically presented. Based on the scheme, some sufficient algebraic criteria for global chaos synchronization of master and slave electro-mechanical gyrostat systems via various single-variable coupling are derived. The effectiveness of the obtained criteria is numerically illustrated by the examples.

Consequences of Location-Dependent Organ of Corti Micro-Mechanics.

Directory of Open Access Journals (Sweden)

Yanju Liu

Full Text Available The cochlea performs frequency analysis and amplification of sounds. The graded stiffness of the basilar membrane along the cochlear length underlies the frequency-location relationship of the mammalian cochlea. The somatic motility of outer hair cell is central for cochlear amplification. Despite two to three orders of magnitude change in the basilar membrane stiffness, the force capacity of the outer hair cell's somatic motility, is nearly invariant over the cochlear length. It is puzzling how actuators with a constant force capacity can operate under such a wide stiffness range. We hypothesize that the organ of Corti sets the mechanical conditions so that the outer hair cell's somatic motility effectively interacts with the media of traveling waves-the basilar membrane and the tectorial membrane. To test this hypothesis, a computational model of the gerbil cochlea was developed that incorporates organ of Corti structural mechanics, cochlear fluid dynamics, and hair cell electro-physiology. The model simulations showed that the micro-mechanical responses of the organ of Corti are different along the cochlear length. For example, the top surface of the organ of Corti vibrated more than the bottom surface at the basal (high frequency location, but the amplitude ratio was reversed at the apical (low frequency location. Unlike the basilar membrane stiffness varying by a factor of 1700 along the cochlear length, the stiffness of the organ of Corti complex felt by the outer hair cell remained between 1.5 and 0.4 times the outer hair cell stiffness. The Y-shaped structure in the organ of Corti formed by outer hair cell, Deiters cell and its phalange was the primary determinant of the elastic reactance imposed on the outer hair cells. The stiffness and geometry of the Deiters cell and its phalange affected cochlear amplification differently depending on the location.

Optimization and Surface Modification of Al-6351 Alloy Using SiC-Cu Green Compact Electrode by Electro Discharge Coating Process

Science.gov (United States)

Chakraborty, Sujoy; Kar, Siddhartha; Dey, Vidyut; Ghosh, Subrata Kumar

2017-06-01

This paper introduces the surface modification of Al-6351 alloy by green compact SiC-Cu electrode using electro-discharge coating (EDC) process. A Taguchi L-16 orthogonal array is employed to investigate the process by varying tool parameters like composition and compaction load and electro-discharge machining (EDM) parameters like pulse-on time and peak current. Material deposition rate (MDR), tool wear rate (TWR) and surface roughness (SR) are measured on the coated specimens. An optimum condition is achieved by formulating overall evaluation criteria (OEC), which combines multi-objective task into a single index. The signal-to-noise (S/N) ratio, and the analysis of variance (ANOVA) is employed to investigate the effect of relevant process parameters. A confirmation test is conducted based on optimal process parameters and experimental results are provided to illustrate the effectiveness of this approach. The modified surface is characterized by optical microscope and X-ray diffraction (XRD) analysis. XRD analysis of the deposited layer confirmed the transfer of tool materials to the work surface and formation of inter-metallic phases. The micro-hardness of the resulting composite layer is also measured which is 1.5-3 times more than work material’s one and highest layer thickness (LT) of 83.644μm has been successfully achieved.

Influence of process parameters on the weld lines of a micro injection molded component

DEFF Research Database (Denmark)

Tosello, Guido; Gava, Alberto; Hansen, Hans Nørgaard

2007-01-01

The insufficient entanglement of the molecular chains and the stress amplification at the v-notch of a weld line compromise the mechanical strength of a plastic product, also in the micro scale. To investigate the influence of process parameters on the weld lines formation, a special micro cavity...... was designed and manufactured by µEDM (Electro Discharge Machining). Weld lines were quantitatively characterized both in the two-dimensional (direction and position) and three-dimensional range (surface topography characterization). Results showed that shape and position of weld lines are mainly influenced...

Analysis of the current density characteristics in through-mask electrochemical micromachining (TMEMM for fabrication of micro-hole arrays on invar alloy film

Directory of Open Access Journals (Sweden)

Da-som JIN

2017-06-01

Full Text Available Invar alloy consisting of 64% iron and 36% nickel has been widely used for the production of shadow masks for organic light emitting diodes (OLEDs because of its low thermal expansion coefficient (1.86 × 10−6 cm/°C. To fabricate micro-hole arrays on 30 μm invar alloy film, through-mask electrochemical micromachining (TMEMM was developed and combined with a portion of the photolithography etching process. For precise hole shapes, patterned photoresist (PR film was applied as an insulating mask. To investigate the relationship between the current density and the material removal rate, the principle of the electrochemical machining was studied with a focus on the equation. The finite element method (FEM was used to verify the influence of each parameter on the current density on the invar alloy film surface. The parameters considered were the thickness of the PR mask, inter-electrode gap (IEG, and electrolyte concentration. Design of experiments (DOE was used to figure out the contribution of each parameter. A simulation was conducted with varying parameters to figure out their relationships with the current density. Optimization was conducted to select the suitable conditions. An experiment was carried out to verify the simulation results. It was possible to fabricate micro-hole arrays on invar alloy film using TMEMM, which is a promising method that can be applied to fabrications of OLEDs shadow masks.

High Temperature Electro-Mechanical Devices For Nuclear Applications

International Nuclear Information System (INIS)

Robertson, D.

2010-01-01

Nuclear power plants require a number of electro-mechanical devices, for example, Control Rod Drive Mechanisms (CRDM's) to control the raising and lowering of control rods and Reactor Coolant Pumps (RCP's) to circulate the primary coolant. There are potential benefits in locating electro-mechanical components in areas of the plant with high ambient temperatures. One such benefit is the reduced need to make penetrations in pressure vessels leading to simplified plant design and improved inherent safety. The feature that limits the ambient temperature at which most electrical machines may operate is the material used for the electrical insulation of the machine windings. Conventional electrical machines generally use polymer-based insulation that limits the ambient temperature they can operate in to below 200 degrees Celsius. This means that when a conventional electrical machine is required to operate in a hot area it must be actively cooled necessitating additional systems. This paper presents data gathered during investigations undertaken by Rolls-Royce into the design of high temperature electrical machines. The research was undertaken at Rolls-Royce's University Technology Centre in Advanced Electrical Machines and Drives at Sheffield University. Rolls- Royce has also been investigating high temperature wire and encapsulants and latterly techniques to provide high temperature insulation to terminations. Rolls-Royce used the experience gained from these tests to produce a high temperature electrical linear actuator at sizes representative of those used in reactor systems. This machine was tested successfully at temperatures equivalent to those found inside the reactor vessel of a pressurised water reactor through a full series of operations that replicated in service duty. The paper will conclude by discussing the impact of the findings and potential electro-mechanical designs that may utilise such high temperature technologies. (authors)

A silicon micromachined resonant pressure sensor

International Nuclear Information System (INIS)

Tang Zhangyang; Fan Shangchun; Cai Chenguang

2009-01-01

This paper describes the design, fabrication and test of a silicon micromachined resonant pressure sensor. A square membrane and a doubly clamped resonant beam constitute a compound structure. The former senses the pressure directly, while the latter changes its resonant frequency according to deformation of the membrane. The final output relation between the resonant frequency and the applied pressure is deducted according to the structure mechanical properties. Sensors are fabricated by micromachining technology, and then sealed in vaccum. These sensors are tested by open-loop and close-loop system designed on purpose. The experiment results demonstrate that the sensor has a sensitivity of 49.8Hz/kPa and repeatability of 0.08%.

High lane density slab-gel electrophoresis using micromachined instrumentation.

Science.gov (United States)

Papautsky, I; Mohanty, S; Weiss, R; Frazier, A B

2001-10-01

In this paper, micromachined pipette arrays (MPAs) and microcombs were studied as a means of enabling high lane density gel electrophoresis. The MPA provide a miniaturized format to interface sub-microliter volumes of samples between macroscale sample preparation formats and microscale biochemical analysis systems. The microcombs provide a means of creating sample loading wells in the gel material on the same center-to-center spacing as the MPAs. Together, the two micromachined instruments provide an alternative to current combs and pipetting technologies used for creating sample loading wells and sample delivery in gel electrophoresis systems. Using three designs for the microcomb-MPA pair, center-to-center spacings of 1.0 mm, 500 microm, and 250 microm are studied. The results demonstrate an approximate 10-fold increase in lane density and a 10-fold reduction in sample size from 5 microL to 500 pL. As a result, the number of theoretical plates has increased 2.5-fold, while system resolution has increased 1.5-fold over the conventional agarose gel systems. An examination of changes in resolution across the width of individual separation lanes in both systems revealed dependence in the case of the conventional gels and no dependence for the gels loaded with the micromachined instrumentation.

Simulations of induced-charge electro-osmosis in microfluidic devices

Science.gov (United States)

Ben, Yuxing

2005-03-01

Theories of nonlinear electrokinetic phenomena generally assume a uniform, neutral bulk electroylte in contact with a polarizable thin double layer near a metal or dielectric surface, which acts as a "capacitor skin". Induced-charge electro-osmosis (ICEO) is the general effect of nonlinear electro-osmotic slip, when an applied electric field acts on its own induced (diffuse) double-layer charge. In most theoretical and experimental work, ICEO has been studied in very simple geometries, such as colloidal spheres and planar, periodic micro-electrode arrays. Here we use finite-element simulations to predict how more complicated geometries of polarizable surfaces and/or electrodes yield flow profiles with subtle dependence on the amplitude and frequency of the applied voltage. We also consider how the simple model equations break down, due to surface conduction, bulk diffusion, and concentration polarization, for large applied voltages (as in most experiments).

A methodology for identification and control of electro-mechanical actuators.

Science.gov (United States)

Tutunji, Tarek A; Saleem, Ashraf

2015-01-01

Mechatronic systems are fully-integrated engineering systems that are composed of mechanical, electronic, and computer control sub-systems. These integrated systems use electro-mechanical actuators to cause the required motion. Therefore, the design of appropriate controllers for these actuators are an essential step in mechatronic system design. In this paper, a three-stage methodology for real-time identification and control of electro-mechanical actuator plants is presented, tested, and validated. First, identification models are constructed from experimental data to approximate the plants' response. Second, the identified model is used in a simulation environment for the purpose of designing a suitable controller. Finally, the designed controller is applied and tested on the real plant through Hardware-in-the-Loop (HIL) environment. The described three-stage methodology provides the following practical contributions: •Establishes an easy-to-follow methodology for controller design of electro-mechanical actuators.•Combines off-line and on-line controller design for practical performance.•Modifies the HIL concept by using physical plants with computer control (rather than virtual plants with physical controllers). Simulated and experimental results for two case studies, induction motor and vehicle drive system, are presented in order to validate the proposed methodology. These results showed that electromechanical actuators can be identified and controlled using an easy-to-duplicate and flexible procedure.

Electro-oxidation of methanol on gold in alkaline media: Adsorption characteristics of reaction intermediates studied using time resolved electro-chemical impedance and surface plasmon resonance techniques

Science.gov (United States)

Assiongbon, K. A.; Roy, D.

2005-12-01

Electro-catalytic oxidation of methanol is the anode reaction in direct methanol fuel cells. We have studied the adsorption characteristics of the intermediate reactants of this multistep reaction on a gold film electrode in alkaline solutions by combining surface plasmon resonance (SPR) measurements with Fourier transform electro-chemical impedance spectroscopy (FT-EIS). Methanol oxidation in this system shows no significant effects of "site poisoning" by chemisorbed CO. Our results suggest that OH - chemisorbed onto Au acts as a stabilizing agent for the surface species of electro-active methanol. Double layer charging/discharging and adsorption/desorption of OH - show more pronounced effects than adsorption/oxidation of methanol in controlling the surface charge density of the Au substrate. These effects are manifested in both the EIS and the SPR data, and serve as key indicators of the surface reaction kinetics. The data presented here describe the important role of adsorbed OH - in electro-catalysis of methanol on Au, and demonstrate how SPR and FT-EIS can be combined for quantitative probing of catalytically active metal-solution interfaces.

Modification and Performance Evaluation of a Low Cost Electro-Mechanically Operated Creep Testing Machine

OpenAIRE

John J. MOMOH; Lanre Y. SHUAIB-BABATA; Gabriel O. ADELEGAN

2010-01-01

Existing mechanically operated tensile and creep testing machine was modified to a low cost, electro-mechanically operated creep testing machine capable of determining the creep properties of aluminum, lead and thermoplastic materials as a function of applied stress, time and temperature. The modification of the testing machine was necessitated by having an electro-mechanically operated creep testing machine as a demonstration model ideal for use and laboratory demonstrations, which will prov...

Predictive modeling, simulation, and optimization of laser processing techniques: UV nanosecond-pulsed laser micromachining of polymers and selective laser melting of powder metals

Science.gov (United States)

Criales Escobar, Luis Ernesto

One of the most frequently evolving areas of research is the utilization of lasers for micro-manufacturing and additive manufacturing purposes. The use of laser beam as a tool for manufacturing arises from the need for flexible and rapid manufacturing at a low-to-mid cost. Laser micro-machining provides an advantage over mechanical micro-machining due to the faster production times of large batch sizes and the high costs associated with specific tools. Laser based additive manufacturing enables processing of powder metals for direct and rapid fabrication of products. Therefore, laser processing can be viewed as a fast, flexible, and cost-effective approach compared to traditional manufacturing processes. Two types of laser processing techniques are studied: laser ablation of polymers for micro-channel fabrication and selective laser melting of metal powders. Initially, a feasibility study for laser-based micro-channel fabrication of poly(dimethylsiloxane) (PDMS) via experimentation is presented. In particular, the effectiveness of utilizing a nanosecond-pulsed laser as the energy source for laser ablation is studied. The results are analyzed statistically and a relationship between process parameters and micro-channel dimensions is established. Additionally, a process model is introduced for predicting channel depth. Model outputs are compared and analyzed to experimental results. The second part of this research focuses on a physics-based FEM approach for predicting the temperature profile and melt pool geometry in selective laser melting (SLM) of metal powders. Temperature profiles are calculated for a moving laser heat source to understand the temperature rise due to heating during SLM. Based on the predicted temperature distributions, melt pool geometry, i.e. the locations at which melting of the powder material occurs, is determined. Simulation results are compared against data obtained from experimental Inconel 625 test coupons fabricated at the National

Characterization of Bitumen Micro-Mechanical Behaviors Using AFM, Phase Dynamics Theory and MD Simulation

Directory of Open Access Journals (Sweden)

Yue Hou

2017-02-01

Full Text Available Fundamental understanding of micro-mechanical behaviors in bitumen, including phase separation, micro-friction, micro-abrasion, etc., can help the pavement engineers better understand the bitumen mechanical performances at macroscale. Recent researches show that the microstructure evolution in bitumen will directly affect its surface structure and micro-mechanical performance. In this study, the bitumen microstructure and micro-mechanical behaviors are studied using Atomic Force Microscopy (AFM experiments, Phase Dynamics Theory and Molecular Dynamics (MD Simulation. The AFM experiment results show that different phase-structure will occur at the surface of the bitumen samples under certain thermodynamic conditions at microscale. The phenomenon can be explained using the phase dynamics theory, where the effects of stability parameter and temperature on bitumen microstructure and micro-mechanical behavior are studied combined with MD Simulation. Simulation results show that the saturates phase, in contrast to the naphthene aromatics phase, plays a major role in bitumen micro-mechanical behavior. A high stress zone occurs at the interface between the saturates phase and the naphthene aromatics phase, which may form discontinuities that further affect the bitumen frictional performance.

Characterization of Bitumen Micro-Mechanical Behaviors Using AFM, Phase Dynamics Theory and MD Simulation.

Science.gov (United States)

Hou, Yue; Wang, Linbing; Wang, Dawei; Guo, Meng; Liu, Pengfei; Yu, Jianxin

2017-02-21

Fundamental understanding of micro-mechanical behaviors in bitumen, including phase separation, micro-friction, micro-abrasion, etc., can help the pavement engineers better understand the bitumen mechanical performances at macroscale. Recent researches show that the microstructure evolution in bitumen will directly affect its surface structure and micro-mechanical performance. In this study, the bitumen microstructure and micro-mechanical behaviors are studied using Atomic Force Microscopy (AFM) experiments, Phase Dynamics Theory and Molecular Dynamics (MD) Simulation. The AFM experiment results show that different phase-structure will occur at the surface of the bitumen samples under certain thermodynamic conditions at microscale. The phenomenon can be explained using the phase dynamics theory, where the effects of stability parameter and temperature on bitumen microstructure and micro-mechanical behavior are studied combined with MD Simulation. Simulation results show that the saturates phase, in contrast to the naphthene aromatics phase, plays a major role in bitumen micro-mechanical behavior. A high stress zone occurs at the interface between the saturates phase and the naphthene aromatics phase, which may form discontinuities that further affect the bitumen frictional performance.

Laser micro-machining of hydrophobic-hydrophilic patterns for fluid driven self-alignment in micro-assembly

NARCIS (Netherlands)

Römer, Gerardus Richardus, Bernardus, Engelina; Jorritsma, Mark; Arnaldo del Cerro, D.; Chang, Bo; Liimatainen, Ville; Zhou, Quan; Huis in 't Veld, Bert

2011-01-01

Fluid driven self-alignment is a low cost alternative to fast but relatively inaccurate robotic pickand-place assembly of micro-fabricated components. This fluidic self-alignment technique relies on a hydrophobic-hydrophilic pattern on the surface of the receiving substrate, which confines a fluid

Finite element modelling and experimental characterization of an electro-thermally actuated silicon-polymer micro gripper

International Nuclear Information System (INIS)

Krecinic, F; Duc, T Chu; Sarro, P M; Lau, G K

2008-01-01

This paper presents simulation and experimental characterization of an electro-thermally actuated micro gripper. This micro actuator can conceptually be seen as a bi-morph structure of SU-8 and silicon, actuated by thermal expansion of the polymer. The polymer micro gripper with an embedded comb-like silicon skeleton is designed to reduce unwanted out-of-plane bending of the actuator, while offering a large gripper stroke. The temperature and displacement field of the micro gripper structure is determined using a two-dimensional finite element analysis. This analysis is compared to experimental data from steady-state and transient measurements of the integrated heater resistance, which depends on the average temperature of the actuator. The stability of the polymer actuator is evaluated by recording the transient behaviour of the actual jaw displacements. The maximum single jaw displacement of this micro gripper design is 34 µm at a driving voltage of 4 V and an average actuator temperature of 170 °C. The transient thermal response is modelled by a first-order system with a characteristic time constant of 11.1 ms. The simulated force capability of the device is 0.57 mN per µm jaw displacement

Tertiary treatment of landfill leachate by an integrated Electro-Oxidation/Electro-Coagulation/Electro-Reduction process: Performance and mechanism.

Science.gov (United States)

Ding, Jing; Wei, Liangliang; Huang, Huibin; Zhao, Qingliang; Hou, Weizhu; Kabutey, Felix Tetteh; Yuan, Yixing; Dionysiou, Dionysios D

2018-06-05

This study presents an integrated Electro-Oxidation/Electro-Coagulation/Electro-Reduction (EO/EC/ER) process for tertiary landfill leachate treatment. The influence of variables including leachate characteristics and operation conditions on the performance of EO/EC/ER process was evaluated. The removal mechanisms were explored by comparing results of anode, cathode, and bipolar electrode substitution experiments. The performance of the process in a scaled-up reactor was investigated to assure the feasibility of the process. Results showed that simultaneous removal of carbonaceous and nitrogenous pollutants was achieved under optimal conditions. Ammonia removal was due to the free chlorine generation of EO while organic matter degradation was achieved by both EO and EC processes. Nitrate removal was attributed to both ER and EC processes, with the higher removal achieved by ER process. In a scaled-up reactor, the EO/EC/ER process was able to remove 50-60% organic matter and 100% ammonia at charge of 1.5 Ah/L with energy consumption of 15 kW h/m 3 . Considering energy cost, the process is more efficient to meet the requirement of organic removal efficiency less than 70%. These results show the feasibility and potential of the EO/EC/ER process as an alternative tertiary treatment to achieve the simultaneous removal of organic matter, ammonia, nitrate, and color of leachate. Copyright © 2018 Elsevier B.V. All rights reserved.

Project in fiscal 2000 of developing international standards for supporting new industries. Standardization of method for evaluating characteristics measurement for micromachine materials; 2000 nendo shinki sangyo shiengata kokusai hyojun kaihatsu jigyo seika hokokusho. Micro machine yo zairyo no tokusei keisoku hyoka hoho no hyojunka

Energy Technology Data Exchange (ETDEWEB)

NONE

2001-03-01

Targeting the international standardization of the method for evaluating properties measurement for micro-machine materials, R and D has been performed on measurement and evaluation of mechanical properties of different thin film materials with a thickness of about 10 {mu}m or less and a width of 100 {mu}m or less. This paper summarizes the achievements in fiscal 2000. The current fiscal year has executed tensile tests of thin film materials for micro-machines, and surveys on technological trends related to the standardization thereof inside and outside the country. A working process was developed to manufacture test pieces of the thin film materials including mono-crystalline silicon for the purpose of executing the round robin test. Prototype test pieces were fabricated. The round robin test was performed by using these test pieces, wherein improvements were given on the test pieces, structure of the testing machine, the distortion measuring method, and the test piece mounting method. Furthermore, discussions were given on the film forming conditions and the heat treatment conditions with regard to mainly the thin titanium film made by using the sputtering process and thin nickel film made by using the plating process. The IEC/TC47/WG4 committee has announced to propose this evaluation technology as the future international standard. (NEDO)

Influence of surface topography in the boiling mechanisms

International Nuclear Information System (INIS)

Moita, A.S.; Teodori, E.; Moreira, A.L.N.

2015-01-01

Highlights: • Pool boiling heat transfer. • Use of micro-textured surfaces to enhance heat transfer. • Importance of the bubble dynamics and of the interaction mechanisms in the overall heat transfer efficiency. • Effect of the micro-textures on bubble dynamics as a way to enhance pool boiling heat transfer. - Abstract: The present paper addresses the qualitative and quantitative analysis of the pool boiling heat transfer over micro-structured surfaces. The surfaces are made from silicon chips, in the context of pool boiling heat transfer enhancement of immersion liquid cooling schemes for electronic components. The first part of the analysis deals with the effect of the liquid properties. Then the effect of surface micro-structuring is discussed, covering different configurations, from cavities to pillars being the latter used to infer on the potential profit of a fin-like configuration. The use of rough surfaces to enhance pool boiling mainly stands on the arguments that the surface roughness will increase the liquid–solid contact area, thus enhancing the convection heat transfer coefficient and will promote the generation of nucleation sites. However, one should not disregard bubble dynamics. Indeed, the results show a strong effect of bubble dynamics and particularly of the interaction mechanisms in the overall cooling performance of the pair liquid–surface. The inaccurate control of these mechanisms leads to the formation of large bubbles and strong vertical and horizontal coalescence effects promote the very fast formation of a vapor blanket, which causes a steep decrease of the heat transfer coefficient. This effect can be strong enough to prevail over the benefit of increasing the contact area by roughening the surface. For the micro-patterns used in the present work, the results evidence that one can reasonably determine guiding pattern characteristics to evaluate the intensity of the interaction mechanisms and take out the most of the

Porous silicon based micro-opto-electro-mechanical-systems (MOEMS) components for free space optical interconnects

Science.gov (United States)

Song, Da

2008-02-01

One of the major challenges confronting the current integrated circuits (IC) industry is the metal "interconnect bottleneck". To overcome this obstacle, free space optical interconnects (FSOIs) can be used to address the demand for high speed data transmission, multi-functionality and multi-dimensional integration for the next generation IC. One of the crucial elements in FSOIs system is to develop a high performance and flexible optical network to transform the incoming optical signal into a distributed set of optical signals whose direction, alignment and power can be independently controlled. Among all the optical materials for the realization of FSOI components, porous silicon (PSi) is one of the most promising candidates because of its unique optical properties, flexible fabrication methods and integration with conventional IC material sets. PSi-based Distributed Bragg Reflector (DBR) and Fabry-Perot (F-P) structures with unique optical properties are realized by electrochemical etching of silicon. By incorporating PSi optical structures with Micro-Opto-Electro-Mechanical-Systems (MOEMS), several components required for FSOI have been developed. The first type of component is the out-of-plane freestanding optical switch. Implementing a PSi DBR structure as an optically active region, the device can realize channel selection by changing the tilting angle of the micromirror supported by the thermal bimorph actuator. All the fabricated optical switches have reached kHz working frequency and life time of millions of cycles. The second type of component is the in-plane tunable optical filter. By introducing PSi F-P structure into the in-plane PSi film, a thermally tunable optical filter with a sensitivity of 7.9nm/V has been realized for add/drop optical signal selection. Also, for the first time, a new type of PSi based reconfigurable diffractive optical element (DOE) has been developed. By using patterned photoresist as a protective mask for electrochemical

Servo scanning 3D micro EDM for array micro cavities using on-machine fabricated tool electrodes

Science.gov (United States)

Tong, Hao; Li, Yong; Zhang, Long

2018-02-01

Array micro cavities are useful in many fields including in micro molds, optical devices, biochips and so on. Array servo scanning micro electro discharge machining (EDM), using array micro electrodes with simple cross-sectional shape, has the advantage of machining complex 3D micro cavities in batches. In this paper, the machining errors caused by offline-fabricated array micro electrodes are analyzed in particular, and then a machining process of array servo scanning micro EDM is proposed by using on-machine fabricated array micro electrodes. The array micro electrodes are fabricated on-machine by combined procedures including wire electro discharge grinding, array reverse copying and electrode end trimming. Nine-array tool electrodes with Φ80 µm diameter and 600 µm length are obtained. Furthermore, the proposed process is verified by several machining experiments for achieving nine-array hexagonal micro cavities with top side length of 300 µm, bottom side length of 150 µm, and depth of 112 µm or 120 µm. In the experiments, a chip hump accumulates on the electrode tips like the built-up edge in mechanical machining under the conditions of brass workpieces, copper electrodes and the dielectric of deionized water. The accumulated hump can be avoided by replacing the water dielectric by an oil dielectric.

Nano-electro-mechanical pump: Giant pumping of water in carbon nanotubes

Science.gov (United States)

Farimani, Amir Barati; Heiranian, Mohammad; Aluru, Narayana R.

2016-05-01

A fully controllable nano-electro-mechanical device that can pump fluids at nanoscale is proposed. Using molecular dynamics simulations, we show that an applied electric field to an ion@C60 inside a water-filled carbon nanotube can pump water with excellent efficiency. The key physical mechanism governing the fluid pumping is the conversion of electrical energy into hydrodynamic flow with efficiencies as high as 64%. Our results show that water can be compressed up to 7% higher than its bulk value by applying electric fields. High flux of water (up to 13,000 molecules/ns) is obtained by the electro-mechanical, piston-cylinder-like moving mechanism of the ion@C60 in the CNT. This large flux results from the piston-like mechanism, compressibility of water (increase in density of water due to molecular ordering), orienting dipole along the electric field and efficient electrical to mechanical energy conversion. Our findings can pave the way towards efficient energy conversion, pumping of fluids at nanoscale, and drug delivery.

Electro-osmosis of nematic liquid crystals under weak anchoring and second-order surface effects

Science.gov (United States)

Poddar, Antarip; Dhar, Jayabrata; Chakraborty, Suman

2017-07-01

Advent of nematic liquid crystal flows has attracted renewed attention in view of microfluidic transport phenomena. Among various transport processes, electro-osmosis stands as one of the efficient flow actuation mechanisms through narrow confinements. In the present study, we explore the electrically actuated flow of an ordered nematic fluid with ionic inclusions, taking into account the influences from surface-induced elasticity and electrical double layer (EDL) phenomena. Toward this, we devise the coupled flow governing equations from fundamental free-energy analysis, considering the contributions from first- and second-order elastic, dielectric, flexoelectric, charged surface polarization, ionic and entropic energies. The present study focuses on the influence of surface charge and elasticity effects in the resulting linear electro-osmosis through a slit-type microchannel whose surfaces are chemically treated to display a homeotropic-type weak anchoring state. An optical periodic stripe configuration of the nematic director has been observed, especially for higher electric fields, wherein the Ericksen number for the dynamic study is restricted to the order of unity. Contrary to the isotropic electrolytes, the EDL potential in this case was found to be dependent on the external field strength. Through a systematic investigation, we brought out the fact that the wavelength of the oscillating patterns is dictated mainly by the external field, while the amplitude depends on most of the physical variables ranging from the anchoring strength and the flexoelectric coefficients to the surface charge density and electrical double layer thickness.

Fatigue Life Assessment of Structures Using Electro-Mechanical Impedance Technique

International Nuclear Information System (INIS)

Bhalla, S

2012-01-01

This paper describes a new experimental approach for fatigue life assessment of structures based on the equivalent stiffness determined by surface bonded piezo-impedance transducers through the electro-mechanical impedance (EMI) technique. The remaining life of the component (in terms of the cycles of loading that can be sustained) is non-dimensionally correlated with the equivalent identified stiffness. The proposed approach circumvents the determination of the absolute stiffness of the joint and employs the admittance signature of the surface-bonded piezo-transducers directly. The second part of the paper briefly describes the recent advances made in the field of impedance based structural health monitoring (SHM) in terms of low-cost hardware system and improved damage diagnosis through the integration of global dynamic and EMI techniques using the same set of piezo-sensors. Other recent applications such as bio-sensors and traffic sensors pioneered at the Smart Structures and Dynamics Laboratory (SSDL) are also briefly covered.

Micro Dot Patterning on the Light Guide Panel Using Powder Blasting

Directory of Open Access Journals (Sweden)

Dong Sam Park

2008-02-01

Full Text Available This study is to develop a micromachining technology for a light guidepanel(LGP mold, whereby micro dot patterns are formed on a LGP surface by a singleinjection process instead of existing screen printing processes. The micro powder blastingtechnique is applied to form micro dot patterns on the LGP mold surface. The optimalconditions for masking, laminating, exposure, and developing processes to form the microdot patterns are first experimentally investigated. A LGP mold with masked micro patternsis then machined using the micro powder blasting method and the machinability of themicro dot patterns is verified. A prototype LGP is test- injected using the developed LGPmold and a shape analysis of the patterns and performance testing of the injected LGP arecarried out. As an additional approach, matte finishing, a special surface treatment method,is applied to the mold surface to improve the light diffusion characteristics, uniformity andbrightness of the LGP. The results of this study show that the applied powder blastingmethod can be successfully used to manufacture LGPs with micro patterns by just singleinjection using the developed mold and thereby replace existing screen printing methods.

On non-linear dynamics of coupled 1+1DOF versus 1+1/2DOF Electro-Mechanical System

DEFF Research Database (Denmark)

Darula, Radoslav; Sorokin, Sergey

2014-01-01

The electro-mechanical systems (EMS) are used from nano-/micro-scale (NEMS/MEMS) up to macro-scale applications. From mathematical view point, they are modelled with the second order differential equation (or a set of equations) for mechanical system, which is nonlinearly coupled with the second...... or the first order differential equation (or a set of equations) for electrical system, depending on properties of the electrical circuit. For the sake of brevity, we assume a 1DOF mechanical system, coupled to 1 or 1/2DOF electrical system (depending whether the capacitance is, or is not considered......). In the paper, authors perform a parametric study to identify operation regimes, where the capacitance term contributes to the non-linear behaviour of the coupled system. To accomplish this task, the classical method of multiple scales is used. The parametric study allows us to assess for which applications...

Towards micro-assembly of hybrid MOEMS components on a reconfigurable silicon free-space micro-optical bench

International Nuclear Information System (INIS)

Bargiel, S; Gorecki, C; Rabenorosoa, K; Clévy, C; Lutz, P

2010-01-01

The 3D integration of hybrid chips is a viable approach for the micro-optical technologies to reduce the costs of assembly and packaging. In this paper a technology platform for the hybrid integration of MOEMS components on a reconfigurable silicon free-space micro-optical bench (FS-MOB) is presented. In this approach a desired optical component (e.g. micromirror, microlens) is integrated with a removable and adjustable silicon holder which can be manipulated, aligned and fixed in the precisely etched rail of the silicon baseplate by use of a robotic micro-assembly station. An active-based gripping system allows modification of the holder position on the baseplate with nanometre precision. The fabrication processes of the micromachined parts of the micro-optical bench, based on bulk micromachining of standard silicon wafer and SOI wafer, are described. The successful assembly of the holders, equipped with a micromirror and a refractive glass ball microlens, on the baseplate rail is demonstrated.

A micro-coupling for micro mechanical systems

Science.gov (United States)

Li, Wei; Zhou, Zhixiong; Zhang, Bi; Xiao, Yunya

2016-05-01

The error motions of micro mechanical systems, such as micro-spindles, increase with the increasing of the rotational speed, which not only decreases the rotational accuracy, but also promotes instability and limits the maximum operational speed. One effective way to deal with it is to use micro-flexible couplings between the drive and driven shafts so as to reduce error motions of the driven shaft. But the conventional couplings, such as diaphragm couplings, elastomeric couplings, bellows couplings, and grooved couplings, etc, cannot be directly used because of their large and complicated structures. This study presents a novel micro-coupling that consists of a flexible coupling and a shape memory alloy (SMA)-based clamp for micro mechanical systems. It is monolithic and can be directly machined from a shaft. The study performs design optimization and provides manufacturing considerations, including thermo-mechanical training of the SMA ring for the desired Two-Way-Shape-Memory effect (TWSMe). A prototype micro-coupling and a prototype micro-spindle using the proposed coupling are fabricated and tested. The testing results show that the prototype micro-coupling can bear a torque of above 5 N • mm and an axial force of 8.5 N and be fitted with an SMA ring for clamping action at room temperature (15 °C) and unclamping action below-5 °C. At the same time, the prototype micro-coupling can work at a rotational speed of above 200 kr/min with the application to a high-speed precision micro-spindle. Moreover, the radial runout error of the artifact, as a substitute for the micro-tool, is less than 3 μm while that of turbine shaft is above 7 μm. It can be concluded that the micro-coupling successfully accommodates misalignment errors of the prototype micro-spindle. This research proposes a micro-coupling which is featured with an SMA ring, and it is designed to clamp two shafts, and has smooth transmission, simple assembly, compact structure, zero-maintenance and

A Three-Dimensional Enormous Surface Area Aluminum Microneedle Array with Nanoporous Structure

International Nuclear Information System (INIS)

Chen, P.Ch.; Zou, J.; Hsieh, Sh.J.; Chen, Ch.Ch.

2013-01-01

We proposed fabricating an aluminum micro needle array with a nano channel structure on the surface by combining micromachining, electrolyte polishing, and anodization methods. The micro needle array provides a three-dimensional (3D) structure that possesses several hundred times more surface area than a traditional nano channel template. Therefore, the micro needle array can potentially be used in many technology applications. This 3D micro needle array device can not only be used for painless injection or extraction, but also for storage, highly sensitive detection, drug delivery, and microelectrodes. From the calculation we made, the micro needle array not only increases surface area, but also enlarges the capacity of the device. Therefore, the micro needle array can further be used on many detecting, storing, or drug delivering applications.

Enhanced methanol electro-oxidation reaction on Pt-CoOx/MWCNTs hybrid electro-catalyst

International Nuclear Information System (INIS)

Nouralishahi, Amideddin; Rashidi, Ali Morad; Mortazavi, Yadollah; Khodadadi, Abbas Ali; Choolaei, Mohammadmehdi

2015-01-01

Highlights: • Promoting effects of Cobalt oxide on methanol electro-oxidation over Pt/MWCNTs are investigated. • Higher activity, about 2.9 times, and enhanced stability are observed on Pt-CoO x /MWCNTs. • Electrochemical active surface area of Pt nanoparticles is significantly improved upon CoO x addition. • Bi-functional mechanism is facilitated in presence of CoO x . - Abstract: The electro-catalytic behavior of Pt-CoO x /MWCNTs in methanol electro-oxidation reaction (MOR) is investigated and compared to that of Pt/MWCNTs. The electro-catalysts were synthesized by an impregnation method using NaBH 4  as the reducing agent. The morphological and physical characteristics of samples are examined by XRD, TEM, ICP and EDS techniques. In the presence of CoO x , Pt nanoparticles were highly distributed on the support with an average particle size of 2 nm, an obvious decrease from 5.1 nm for Pt/MWCNTs. Cyclic voltammetry, CO-stripping, Chronoamperometry, and electrochemical impedance spectroscopy (EIS) measurements are used to study the electrochemical behavior of the electro-catalysts. The results revealed a considerable enhancement in the oxidation kinetics of CO ads on Pt active sites by the participation of CoO x . Compared to Pt/MWCNTs, Pt-CoO x /MWCNTs sample has a larger electrochemical active surface area (ECSA) and higher electro-catalytic activity and stability toward methanol electro-oxidation. According to the results of cyclic voltammetry, the forward anodic peak current density enhances more than 89% at the optimum atomic ratio of Pt:Co = 2:1. Furthermore, inclusion of cobalt oxide species causes the onset potential of methanol electro-oxidation reaction to shift 84 mV to negative values compared to that on Pt/MWCNTs. Based on EIS data, dehydrogenation of methanol is the rate-determining step of MOR on both Pt/MWCNTs and Pt-CoO x /MWCNTs, at small overpotentials. However, at higher overpotentials, the oxidation of adsorbed oxygen-containing groups

Effects of Laser Operating Parameters on Piezoelectric Substrates Micromachining with Picosecond Laser

Directory of Open Access Journals (Sweden)

Lamia EL Fissi

2014-12-01

Full Text Available Ten picoseconds (200 kHz ultrafast laser micro-structuring of piezoelectric substrates including AT-cut quartz, Lithium Niobate and Lithium Tantalate have been studied for the purpose of piezoelectric devices application ranging from surface acoustic wave devices, e.g., bandpass filters, to photonic devices such as optical waveguides and holograms. The study examines the impact of changing several laser parameters on the resulting microstructural shapes and morphology. The micromachining rate has been observed to be strongly dependent on the operating parameters, such as the pulse fluence, the scan speed and the scan number. The results specifically indicate that ablation at low fluence and low speed scan tends to form a U-shaped cross-section, while a V-shaped profile can be obtained by using a high fluence and a high scan speed. The evolution of surface morphology revealed that laser pulses overlap in a range around 93% for both Lithium Niobate (LiNbO3 and Lithium Tantalate (LiTaO3 and 98% for AT-cut quartz can help to achieve optimal residual surface roughness.

Development of micro-engineered textured tungsten surfaces for high heat flux applications

Energy Technology Data Exchange (ETDEWEB)

Sharafat, Shahram, E-mail: shahrams@ucla.edu [University of California Los Angeles, CA (United States); Aoyama, Aaron [University of California Los Angeles, CA (United States); Williams, Brian, E-mail: brian.williams@ultramet.com [Ultramet Inc., Pacoima, CA (United States); Ghoniem, Nasr [University of California Los Angeles, CA (United States)

2013-11-15

Surface micro-engineering can enhance the thermo-mechanical performance of plasma facing components (PFCs). For example, castellation of a surface can reduce thermal stress due to high heat loads and thus provide higher thermo-mechanical resilience. Recently, fabrication of a variety of micro-sized refractory dendrites with reproducible geometric characteristics (e.g., density, length, height, and aspect ratio) has been demonstrated. In contrast to flat surfaces exposed to high heat loads, dendrites deform independently to minimize near-surface thermal stress, which results in improved thermo-mechanical performance. Thus, the use of dendrites offers a unique micro-engineering approach to enhance the performance of PFC structures. A brief overview of W, Re, and Mo dendritic structures is given along with micrographs that show dendrite-coated surfaces. The thermal responses of representative dendrite structures are analyzed as a function of aspect ratios and dendrite geometry. The heat-management capability of needle-like dendrites exposed to a surface energy of up to 1 MJ/m{sup 2} is analyzed and compared to a flat surface. It is concluded that dendrite structures can significantly reduce thermal stress in the substrate when compared to flat surfaces. Implications of dendritic surfaces on sputter erosion rates are also discussed briefly.

Concepção de um pequeno sensor inercial 3D

OpenAIRE

Morgado, Francisco Luís Magno

2009-01-01

Com este trabalho pretende-se desenvolver um IMU (Inertial Measurement Unit), fazendo uso de acelerómetros e giroscópios MEMS (Micro-machined Electro-Mechanical Systems) de baixo custo. Esta tecnologia emergente abre novas portas no mundo dos sistemas de navegação inerciais dada a sua simplicidade mecânica. Este IMU permite transferir as medidas para uma unidade de processamento/armazenamento e, por conseguinte, a sua integração em sistemas de navegação mais complexos que façam uso de m...

Maximising electro-mechanical response by minimising grain-scale strain heterogeneity in phase-change actuator ceramics

DEFF Research Database (Denmark)

Oddershede, Jette; Hossain, Mohammad Jahangir; Daniels, John E.

2016-01-01

Phase-change actuator ceramics directly couple electrical and mechanical energies through an electric-field-induced phase transformation. These materials are promising for the replacement of the most common electro-mechanical ceramic, lead zirconate titanate, which has environmental concerns. Here......, we show that by compositional modification, we reduce the grain-scale heterogeneity of the electro-mechanical response by 40%. In the materials investigated, this leads to an increase in the achievable electric-field-induced strain of the bulk ceramic of 45%. Compositions of (100-x)Bi0.5Na0.5TiO3-(x...... heterogeneity can be achieved by precise control of the lattice distortions and orientation distributions of the induced phases. The current results can be used to guide the design of next generation high-strain electro-mechanical ceramic actuator materials....

DETERMINATION OF TRANSMISSION GEAR RATIO IN MECHANICAL PART OF TRACTOR ELECTRO-MECHANICAL TRANSMISSION

Directory of Open Access Journals (Sweden)

Ch. I. Zhdanovich

2016-01-01

Full Text Available A methodology has been developed for selection of gear number and transmission gear ratios in mechanical part of a wheel-type tractor with electro-mechanical transmission containing a propulsion asynchronous electric motor with variablefrequency control. The paper proposes to determine a transmission gear ratio on the basis of the following: provision of wheel torque dependence on tractor speed which is the best one for a traction process and during transfer from one gear to the other; provision of nominal operational mode of the electric motor for all tractor operations where it is working for a long period of time; provision of minimum possible number of gears; complete realization of internal combustion engine power on the tractor wheels at limit operational mode of the electric motor. As a characteristic of the asynchronous electric motor with variable-frequency control contains various portions which can be used either completely or partially due to operating conditions, the gear number is determined in the process of transmission gear ration finding but not prior to this. A wheel torque of the tractor with electro-mechanical transmission can be limited according to the following factors: grip of wheel with supporting surface; maximum power of an internal combustion engine which can be transferred to the wheels and a torque which is developed by a propulsion electric motor. It is not proposed to exceed nominal operational mode of the propulsion electric motor for all the operations of the tractor if it is working for a long period of time because in the case of significant excess of the nominal operational mode of the asynchronous electric motor its rather long operation leads to low efficiency and high losses in power, large heat liberation and consequently requires to develop more complicated system for electric motor cooling. An excess of nominal electric motor torque can be justified for short-term operational modes because in this case

Electro-mechanical impact system excited by a source of limited power

Czech Academy of Sciences Publication Activity Database

Půst, Ladislav

2008-01-01

Roč. 15, č. 6 (2008), s. 1-10 ISSN 1802-1484 R&D Projects: GA ČR GA101/06/0063 Institutional research plan: CEZ:AV0Z20760514 Keywords : mechanical oscillations * impacts * limited power of exciter * electro-mechanical interaction Subject RIV: BI - Acoustics

Vascular tissue engineering by computer-aided laser micromachining.

Science.gov (United States)

Doraiswamy, Anand; Narayan, Roger J

2010-04-28

Many conventional technologies for fabricating tissue engineering scaffolds are not suitable for fabricating scaffolds with patient-specific attributes. For example, many conventional technologies for fabricating tissue engineering scaffolds do not provide control over overall scaffold geometry or over cell position within the scaffold. In this study, the use of computer-aided laser micromachining to create scaffolds for vascular tissue networks was investigated. Computer-aided laser micromachining was used to construct patterned surfaces in agarose or in silicon, which were used for differential adherence and growth of cells into vascular tissue networks. Concentric three-ring structures were fabricated on agarose hydrogel substrates, in which the inner ring contained human aortic endothelial cells, the middle ring contained HA587 human elastin and the outer ring contained human aortic vascular smooth muscle cells. Basement membrane matrix containing vascular endothelial growth factor and heparin was to promote proliferation of human aortic endothelial cells within the vascular tissue networks. Computer-aided laser micromachining provides a unique approach to fabricate small-diameter blood vessels for bypass surgery as well as other artificial tissues with complex geometries.

High-speed micro electrode tool fabrication by a twin-wire EDM system

International Nuclear Information System (INIS)

Sheu, Dong-Yea

2008-01-01

This paper describes a new machining process which combines twin-electro-wire together with two electro discharge circuits to rapidly fabricate micro electrode tools. The results show that transistor electro discharge and RC electro discharge circuits coexist to fabricate micro tools with rough and finish machining both on the same machine. Compared to conventional wire electro discharge grinding (WEDG) technology, a twin-wire EDM system that combines rough and finish machining into one process allows the efficient fabrication of micro tools. This high-speed micro tool fabrication process can be applied not only to micro electrode machining but also to micro punching tool and micro probing tips machining

Laser micromachining of sputtered DLC films

International Nuclear Information System (INIS)

Fu, Y.Q.; Luo, J.K.; Flewitt, A.J.; Ong, S.E.; Zhang, S.; Milne, W.I.

2006-01-01

DLC films with different thicknesses (from 100 nm to 1.9 μm) were deposited using sputtering of graphite target in pure argon atmosphere without substrate heating. Film microstructures (sp 2 /sp 3 ratio) and mechanical properties (modulus, hardness, stress) were characterized as a function of film thickness. A thin layer of aluminum about 60 nm was deposited on the DLC film surface. Laser micromachining of Al/DLC layer was performed to form microcantilever structures, which were released using a reactive ion etching system with SF 6 plasma. Due to the intrinsic stress in DLC films and bimorph Al/DLC structure, the microcantilevers bent up with different curvatures. For DLC film of 100 nm thick, the cantilever even formed microtubes. The relationship between the bimorph beam bending and DLC film properties (such as stress, modulus, etc.) were discussed in details

Ultrafast disk technology enables next generation micromachining laser sources

Science.gov (United States)

Heckl, Oliver H.; Weiler, Sascha; Luzius, Severin; Zawischa, Ivo; Sutter, Dirk

2013-02-01

Ultrashort pulsed lasers based on thin disk technology have entered the 100 W regime and deliver several tens of MW peak power without chirped pulse amplification. Highest uptime and insensitivity to back reflections make them ideal tools for efficient and cost effective industrial micromachining. Frequency converted versions allow the processing of a large variety of materials. On one hand, thin disk oscillators deliver more than 30 MW peak power directly out of the resonator in laboratory setups. These peak power levels are made possible by recent progress in the scaling of the pulse energy in excess of 40 μJ. At the corresponding high peak intensity, thin disk technology profits from the limited amount of material and hence the manageable nonlinearity within the resonator. Using new broadband host materials like for example the sesquioxides will eventually reduce the pulse duration during high power operation and further increase the peak power. On the other hand industry grade amplifier systems deliver even higher peak power levels. At closed-loop controlled 100W, the TruMicro Series 5000 currently offers the highest average ultrafast power in an industry proven product, and enables efficient micromachining of almost any material, in particular of glasses, ceramics or sapphire. Conventional laser cutting of these materials often requires UV laser sources with pulse durations of several nanoseconds and an average power in the 10 W range. Material processing based on high peak power laser sources makes use of multi-photon absorption processes. This highly nonlinear absorption enables micromachining driven by the fundamental (1030 nm) or frequency doubled (515 nm) wavelength of Yb:YAG. Operation in the IR or green spectral range reduces the complexity and running costs of industrial systems initially based on UV light sources. Where UV wavelength is required, the TruMicro 5360 with a specified UV crystal life-time of more than 10 thousand hours of continues

Enhancement of silicon using micro-patterned surfaces of thin films

Directory of Open Access Journals (Sweden)

E Kaivosoja

2010-04-01

Full Text Available Micro-textured biomaterials might enhance cytocompatibility of silicon-based micro-electro-mechanical system (bio-MEMS dummies. Photolithography-physical vapour deposition was used to produce diamond-like carbon (DLC or Ti squares and circles on silicon, and also their inverse replicas; then DLC and Ti were compared for their guiding potential, using a SaOS-2 cell model. Scanning electron microscopy at 48 hours indicated cells were well-spread on large-sized patterns (several cells on one pattern and assumed the geometrical architecture of underlying features. Medium-sized patterns (slightly smaller than solitary indicator cells were inhabited by singular cells, which stretched from one island to another, assuming longitudinal or branching morphologies. On small-sized patterns (much smaller than individual cells cells covered large micro-textured areas, but cellular filopodia bypassed the bare silicon. Immunofluorescence and confocal laser scanning microscopy indicated that the actin cytoskeleton and vinculin-containing adhesion junctions were present on the patterned areas, but not on the bare silicon. Cell density/coverage disclosed a 3.4-3.7-fold preference for the biomaterial patterns over silicon substrate (p < 0.001. Differences in the cellular response between materials were lost at 120 hours when cells were confluent. The working hypothesis was proven; enhancement by micro-patterning depends on the pattern size, shape and material and can be used to improve biocompatibility during the initial integration phase of the device.

3D sensors and micro-fabricated detector systems

International Nuclear Information System (INIS)

Da Vià, Cinzia

2014-01-01

Micro-systems based on the Micro Electro Mechanical Systems (MEMS) technology have been used in miniaturized low power and low mass smart structures in medicine, biology and space applications. Recently similar features found their way inside high energy physics with applications in vertex detectors for high-luminosity LHC Upgrades, with 3D sensors, 3D integration and efficient power management using silicon micro-channel cooling. This paper reports on the state of this development

Epitaxial growth of metallic buffer layer structure and c-axis oriented Pb(Mn1/3,Nb2/3)O3-Pb(Zr,Ti)O3 thin film on Si for high performance piezoelectric micromachined ultrasonic transducer

Science.gov (United States)

Thao, Pham Ngoc; Yoshida, Shinya; Tanaka, Shuji

2017-12-01

This paper reports on the development of a metallic buffer layer structure, (100) SrRuO3 (SRO)/(100) Pt/(100) Ir/(100) yttria-stabilized zirconia (YSZ) layers for the epitaxial growth of a c-axis oriented Pb(Mn1/3,Nb2/3)O3-Pb(Zr,Ti)O3 (PMnN-PZT) thin film on a (100) Si wafer for piezoelectric micro-electro mechanical systems (MEMS) application. The stacking layers were epitaxially grown on a Si substrate under the optimal deposition condition. A crack-free PMnN-PZT epitaxial thin films was obtained at a thickness up to at least 1.7 µm, which is enough for MEMS applications. The unimorph MEMS cantilevers based on the PMnN-PZT thin film were fabricated and characterized. As a result, the PMnN-PZT thin film exhibited -10 to -12 C/m2 as a piezoelectric coefficient e 31,f and ˜250 as a dielectric constants ɛr. The resultant FOM for piezoelectric micromachined ultrasonic transducer (pMUT) is higher than those of general PZT and AlN thin films. This structure has a potential to provide high-performance pMUTs.

Geometry and surface damage in micro electrical discharge machining of micro-holes

Science.gov (United States)

Ekmekci, Bülent; Sayar, Atakan; Tecelli Öpöz, Tahsin; Erden, Abdulkadir

2009-10-01

Geometry and subsurface damage of blind micro-holes produced by micro electrical discharge machining (micro-EDM) is investigated experimentally to explore the relational dependence with respect to pulse energy. For this purpose, micro-holes are machined with various pulse energies on plastic mold steel samples using a tungsten carbide tool electrode and a hydrocarbon-based dielectric liquid. Variations in the micro-hole geometry, micro-hole depth and over-cut in micro-hole diameter are measured. Then, unconventional etching agents are applied on the cross sections to examine micro structural alterations within the substrate. It is observed that the heat-damaged segment is composed of three distinctive layers, which have relatively high thicknesses and vary noticeably with respect to the drilling depth. Crack formation is identified on some sections of the micro-holes even by utilizing low pulse energies during machining. It is concluded that the cracking mechanism is different from cracks encountered on the surfaces when machining is performed by using the conventional EDM process. Moreover, an electrically conductive bridge between work material and debris particles is possible at the end tip during machining which leads to electric discharges between the piled segments of debris particles and the tool electrode during discharging.

Geometry and surface damage in micro electrical discharge machining of micro-holes

International Nuclear Information System (INIS)

Ekmekci, Bülent; Sayar, Atakan; Öpöz, Tahsin Tecelli; Erden, Abdulkadir

2009-01-01

Geometry and subsurface damage of blind micro-holes produced by micro electrical discharge machining (micro-EDM) is investigated experimentally to explore the relational dependence with respect to pulse energy. For this purpose, micro-holes are machined with various pulse energies on plastic mold steel samples using a tungsten carbide tool electrode and a hydrocarbon-based dielectric liquid. Variations in the micro-hole geometry, micro-hole depth and over-cut in micro-hole diameter are measured. Then, unconventional etching agents are applied on the cross sections to examine micro structural alterations within the substrate. It is observed that the heat-damaged segment is composed of three distinctive layers, which have relatively high thicknesses and vary noticeably with respect to the drilling depth. Crack formation is identified on some sections of the micro-holes even by utilizing low pulse energies during machining. It is concluded that the cracking mechanism is different from cracks encountered on the surfaces when machining is performed by using the conventional EDM process. Moreover, an electrically conductive bridge between work material and debris particles is possible at the end tip during machining which leads to electric discharges between the piled segments of debris particles and the tool electrode during discharging

Electro-mechanical properties of free standing micro- and nano-scale polymer-ceramic composites for energy density capacitors

Energy Technology Data Exchange (ETDEWEB)

Singh, Paritosh; Borkar, Hitesh [CSIR-National Physical Laboratory, Dr. K. S. Krishnan Marg, New Delhi, 110012 (India); Academy of Scientific and Innovative Research (AcSIR), CSIR-National Physical Laboratory (CSIR-NPL) Campus, Dr. K. S. Krishnan Road, New Delhi, 110012 (India); Singh, B.P.; Singh, V.N. [CSIR-National Physical Laboratory, Dr. K. S. Krishnan Marg, New Delhi, 110012 (India); Kumar, Ashok, E-mail: ashok553@nplindia.org [CSIR-National Physical Laboratory, Dr. K. S. Krishnan Marg, New Delhi, 110012 (India); Academy of Scientific and Innovative Research (AcSIR), CSIR-National Physical Laboratory (CSIR-NPL) Campus, Dr. K. S. Krishnan Road, New Delhi, 110012 (India)

2015-11-05

The integration of inorganic fillers in polymer matrix is useful for superior mechanical strength and functional properties of polymer-ceramic composites. We report the fabrication and characterization of polyvinylidene fluoride-CoFe{sub 2}O{sub 4} (PVDF-CFO) (wt% 80:20, respectively) and PVDF-Pb(Zr{sub 0.52}Ti{sub 0.48})O{sub 3}–CoFe{sub 2}O{sub 4} (PVDF-PZT-CFO) (wt% 80:10:10, respectively) free standing 50 μm thick ferroelectric-polymer-ceramic composites films. X-ray diffraction (XRD) patterns and Raman spectra revealed the presence of major semi-crystalline β-PVDF along with α-phase which is responsible for ferroelectric nature in both the composite systems. Ferroelectric, dielectric and mechanical strength measurements were performed in order to evaluate the effects of CFO and PZT inorganic fillers in PVDF matrix. The inclusion of CFO and PZT micro-/nano-particles in PVDF polymer matrix improved the polarization behavior, dielectric properties and mechanical strength. The energy density was calculated by polarization-electric field hysteresis loop and found in the range of 6–8 J/cm{sup 3} may be useful for microelectronics. - Graphical abstract: Large area PVDF-PZT-CFO nano- and micro-composite films have been fabricated for high energy density storage flexible capacitor. Presence of nanocrystalline PZT and CFO particles in polymer matrix significantly enhanced their energy density capacity. - Highlights: • Physical interaction of cobalt iron oxide with polymer matrix results β-PVDF phase. • Evidence of Micro and Nano crystalline CFO and PZT fillers in polymer matrix. • The CFO and PZT fillers provide better mechanical strength to composite films. • PVDF-ceramic nanocomposites show low leakage behavior for high electric field.

Micro/nano-mechanical test system employing tensile test holder with push-to-pull transformer

Science.gov (United States)

Oh, Yunje; Cyrankowski, Edward; Shan, Zhiwei; Asif, Syed Amanula Syed

2013-05-07

A micromachined or microelectromechanical system (MEMS) based push-to-pull mechanical transformer for tensile testing of micro-to-nanometer scale material samples including a first structure and a second structure. The second structure is coupled to the first structure by at least one flexible element that enables the second structure to be moveable relative to the first structure, wherein the second structure is disposed relative to the first structure so as to form a pulling gap between the first and second structures such that when an external pushing force is applied to and pushes the second structure in a tensile extension direction a width of the pulling gap increases so as to apply a tensile force to a test sample mounted across the pulling gap between a first sample mounting area on the first structure and a second sample mounting area on the second structure.

The transverse shear deformation behaviour of magneto-electro-elastic shell

International Nuclear Information System (INIS)

Albarody, Thar M. Badri; Al-Kayiem, Hussain H.; Faris, Waleed

2016-01-01

Compared to the large number of possible magneto-electro-elastic shell theories, very few exact solutions determining the in-plane stresses, electric displacements and magnetic inductions are possible. While, solving the magneto-electro-elastic shell equations in terms of thermo-magneto-electro-elastic generalized field functions on arbitrary domains and for general conditions exactly are not always possible. In the present work, a linear version of magneto-electro-elastic shell with simply supported boundary conditions, solved exactly, provided that the lamination scheme is cross-ply or anti-symmetric angle-ply laminates. The exact solution that introduced herein can measure the in-plane stresses, electric displacements and magnetic inductions. It also allow for an accurate and usually elegant and conclusive investigation of the various sensations in a shell structure. However, it is important for micro-electro-mechanical shell applications to have an approach available that gives the transverse shear deformation Behaviour for cases that cannot examine experimentally. An investigated examples were accompanied and noteworthy conclusions were drawn which highlight the issues of the implementation of the exact solution, implication of the effects of the material properties, lay-ups of the constituent layers, and shell parameters on the static Behaviour

The transverse shear deformation behaviour of magneto-electro-elastic shell

Energy Technology Data Exchange (ETDEWEB)

Albarody, Thar M. Badri; Al-Kayiem, Hussain H. [UniversitiTeknologi PETRONAS, Perak (Malaysia); Faris, Waleed [International Islamic University Malaysia, Perak (Malaysia)

2016-01-15

Compared to the large number of possible magneto-electro-elastic shell theories, very few exact solutions determining the in-plane stresses, electric displacements and magnetic inductions are possible. While, solving the magneto-electro-elastic shell equations in terms of thermo-magneto-electro-elastic generalized field functions on arbitrary domains and for general conditions exactly are not always possible. In the present work, a linear version of magneto-electro-elastic shell with simply supported boundary conditions, solved exactly, provided that the lamination scheme is cross-ply or anti-symmetric angle-ply laminates. The exact solution that introduced herein can measure the in-plane stresses, electric displacements and magnetic inductions. It also allow for an accurate and usually elegant and conclusive investigation of the various sensations in a shell structure. However, it is important for micro-electro-mechanical shell applications to have an approach available that gives the transverse shear deformation Behaviour for cases that cannot examine experimentally. An investigated examples were accompanied and noteworthy conclusions were drawn which highlight the issues of the implementation of the exact solution, implication of the effects of the material properties, lay-ups of the constituent layers, and shell parameters on the static Behaviour.

Nonlinear electro-magneto-mechanical constitutive modelling of monolayer graphene

Science.gov (United States)

Sfyris, D.; Sfyris, G. I.; Bustamante, R.

2016-04-01

Using the classical theory of invariants for the specific class of graphene's symmetry, we constitutively characterize electro-magneto-mechanical interactions of graphene at continuum level. Graphene's energy depends on five arguments: the Finger strain tensor, the curvature tensor, the shift vector, the effective electric field intensity and the effective magnetic induction. The Finger strain tensor describes in- surface phenomena, the curvature tensor is responsible for the out-of-surface motions, while the shift vector is used due to the fact that graphene is a multilattice. The electric and the magnetic fields are described by the effective electric field intensity and the effective magnetic induction, respectively. An energy with the above arguments that also respects graphene's symmetries is found to have 42 invariants. Using these invariants, we evaluate all relevant measures by finding derivatives of the energy with respect to the five arguments of the energy. We also lay down the field equations that should be satisfied. These are the Maxwell equations, the momentum equation, the moment of momentum equation and the equation ruling the shift vector. Our framework is general enough to capture fully coupled processes in the finite deformation regime.

Micromachining of buried micro channels in silicon

NARCIS (Netherlands)

de Boer, Meint J.; Tjerkstra, R.W.; Berenschot, Johan W.; Jansen, Henricus V.; Burger, G.J.; Burger, G.J.; Gardeniers, Johannes G.E.; Elwenspoek, Michael Curt; van den Berg, Albert

A new method for the fabrication of micro structures for fluidic applications, such as channels, cavities, and connector holes in the bulk of silicon wafers, called buried channel technology (BCT), is presented in this paper. The micro structures are constructed by trench etching, coating of the

Design of Electro-Mechanical Dual-Acting Pulley Continuously Variable Transmission

Directory of Open Access Journals (Sweden)

K.B. Tawi

2015-06-01

Full Text Available Pulley-based continuously variable transmission (CVT with a metal pushing V-belt is fast becoming the preferred choice for global carmakers due to its potential particularly in terms of fuel efficiency thanks to its continuous and wide ratio range. Nevertheless, the existing CVTs still face the issues of high power consumption from the engine because of the application of an electro-hydro-mechanical (EHM actuation system for its ratio changing process and clamping force mechanism. To address this issue, researchers from Universiti Teknologi Malaysia have successfully developed the prototype of an electro-mechanical dual-acting pulley continuously variable transmission (EMDAP CVT for automotive applications. The prototype of EMDAP CVT is developed for a maximum input torque of 160 Nm with the application of a metal pushing V-belt. The results from the testing prove that the prototype can vary its ratio from 2.8 to 0.6 and no continuous power is required to maintain a constant CVT ratio. These results suggest that the prototype is workable and future testing in a real car is possible.

Polymer micro-grippers with an integrated force sensor for biological manipulation

International Nuclear Information System (INIS)

Mackay, R E; Le, H R; Clark, S; Williams, J A

2013-01-01

The development of a novel micro-system integrating SU-8 polymer micro-grippers with a tensile force sensor for handling and characterizing the mechanical properties of delicate biological materials, such as fibrils, is presented. The micro-grippers are actuated by the electro-thermal effect and have gripping forces comparable to the common ‘hot-and-cold-arm’ grippers. A robust finite element model was developed to investigate system performance and validated experimentally. A new micro-mechanical calibration method using a piezoelectric manipulator with a micro-force measurement system was successfully applied to test the structure. Both FEA simulation and micro-mechanical testing results indicated that the system could fulfil the requirements for micro-object manipulation within a biological environment. (paper)

Optimal stochastic management of renewable MG (micro-grids) considering electro-thermal model of PV (photovoltaic)

International Nuclear Information System (INIS)

Najibi, Fatemeh; Niknam, Taher; Kavousi-Fard, Abdollah

2016-01-01

This paper aims to report the results of the research conducted to one thermal and electrical model for photovoltaic. Moreover, one probabilistic framework is introduced for considering all uncertainties in the optimal energy management of Micro-Grid problem. It should be noted that one typical Micro-Grid is being studied as a case, including different renewable energy sources, such as Photovoltaic, Micro Turbine, Wind Turbine, and one battery as a storage device for storing energy. The uncertainties of market price variation, photovoltaic and wind turbine output power change and load demand error are covered by the suggested probabilistic framework. The Micro-Grid problem is of nonlinear nature because of the stochastic behavior of the renewable energy sources such as Photovoltaic and Wind Turbine units, and hence there is need for a powerful tool to solve the problem. Therefore, in addition to the simulated thermal model and suggested probabilistic framework, a new algorithm is also introduced. The Backtracking Search Optimization Algorithm is described as a useful method to optimize the MG (micro-grids) problem. This algorithm has the benefit of escaping from the local optima while converging fast, too. The proposed algorithm is also tested on the typical Micro-Grid. - Highlights: • Proposing an electro-thermal model for PV. • Proposing a new stochastic formulation for optimal operation of renewable MGs. • Introduction of a new optimization method based on BSO to explore the problem search space.

Enhanced methanol electro-oxidation reaction on Pt-CoO{sub x}/MWCNTs hybrid electro-catalyst

Energy Technology Data Exchange (ETDEWEB)

Nouralishahi, Amideddin, E-mail: Nouralishahi@ut.ac.ir [Catalysis and Nanostructured Materials Research Laboratory, School of Chemical Engineering, University of Tehran, P.O. Box 11155/4563, Tehran (Iran, Islamic Republic of); Caspian Faculty of Engineering, University of Tehran, P.O. Box 43841-119, Rezvanshahr (Iran, Islamic Republic of); Catalysis and Nanotechnology Research Division, Research Institute of Petroleum Industry (RIPI), P.O. Box 14665-1998, Tehran (Iran, Islamic Republic of); Rashidi, Ali Morad, E-mail: Rashidiam@ripi.ir [Catalysis and Nanotechnology Research Division, Research Institute of Petroleum Industry (RIPI), P.O. Box 14665-1998, Tehran (Iran, Islamic Republic of); Mortazavi, Yadollah, E-mail: Mortazav@ut.ac.ir [Catalysis and Nanostructured Materials Research Laboratory, School of Chemical Engineering, University of Tehran, P.O. Box 11155/4563, Tehran (Iran, Islamic Republic of); Khodadadi, Abbas Ali, E-mail: Khodadad@ut.ac.ir [Catalysis and Nanostructured Materials Research Laboratory, School of Chemical Engineering, University of Tehran, P.O. Box 11155/4563, Tehran (Iran, Islamic Republic of); Choolaei, Mohammadmehdi, E-mail: Choolaeimm@ripi.ir [Catalysis and Nanotechnology Research Division, Research Institute of Petroleum Industry (RIPI), P.O. Box 14665-1998, Tehran (Iran, Islamic Republic of)

2015-04-30

Highlights: • Promoting effects of Cobalt oxide on methanol electro-oxidation over Pt/MWCNTs are investigated. • Higher activity, about 2.9 times, and enhanced stability are observed on Pt-CoO{sub x}/MWCNTs. • Electrochemical active surface area of Pt nanoparticles is significantly improved upon CoO{sub x} addition. • Bi-functional mechanism is facilitated in presence of CoO{sub x}. - Abstract: The electro-catalytic behavior of Pt-CoO{sub x}/MWCNTs in methanol electro-oxidation reaction (MOR) is investigated and compared to that of Pt/MWCNTs. The electro-catalysts were synthesized by an impregnation method using NaBH{sub 4} as the reducing agent. The morphological and physical characteristics of samples are examined by XRD, TEM, ICP and EDS techniques. In the presence of CoO{sub x}, Pt nanoparticles were highly distributed on the support with an average particle size of 2 nm, an obvious decrease from 5.1 nm for Pt/MWCNTs. Cyclic voltammetry, CO-stripping, Chronoamperometry, and electrochemical impedance spectroscopy (EIS) measurements are used to study the electrochemical behavior of the electro-catalysts. The results revealed a considerable enhancement in the oxidation kinetics of CO{sub ads} on Pt active sites by the participation of CoO{sub x}. Compared to Pt/MWCNTs, Pt-CoO{sub x}/MWCNTs sample has a larger electrochemical active surface area (ECSA) and higher electro-catalytic activity and stability toward methanol electro-oxidation. According to the results of cyclic voltammetry, the forward anodic peak current density enhances more than 89% at the optimum atomic ratio of Pt:Co = 2:1. Furthermore, inclusion of cobalt oxide species causes the onset potential of methanol electro-oxidation reaction to shift 84 mV to negative values compared to that on Pt/MWCNTs. Based on EIS data, dehydrogenation of methanol is the rate-determining step of MOR on both Pt/MWCNTs and Pt-CoO{sub x}/MWCNTs, at small overpotentials. However, at higher overpotentials, the

Experimental investigation on low-frequency vibration assisted micro-WEDM of Inconel 718

Directory of Open Access Journals (Sweden)

Deepak Rajendra Unune

2017-02-01

Full Text Available The micro-wire electric discharge machining (micro-WEDM has emerged as the popular micromachining processes for fabrication of micro-features. However, the low machining rate and poor surface finish are restricting wide applications of this process. Therefore, in this study, an attempt was made to improve machining rate of micro-WEDM with low-frequency workpiece vibration assistance. The gap voltage, capacitance, feed rate and vibrational frequency were chosen as control factors, whereas, the material removal rate (MRR and kerf width were selected as performance measures while fabricating microchannels in Inconel 718. It was observed that in micro-WEDM, the capacitance is the most significant factor affecting both MRR and kerf width. It was witnessed that the low-frequency workpiece vibration improves the performance of micro-WEDM by improving the MRR due to enhanced flushing conditions and reduced electrode-workpiece adhesion.

Quality control of injection moulded micro mechanical parts

DEFF Research Database (Denmark)

Gasparin, Stefania; Tosello, Guido; Hansen, Hans Nørgaard

2009-01-01

Quality control of micro components is an increasing challenge. Smaller mechanical parts are characterized by smaller tolerance to be verified. This paper focuses on the dimensional verification of micro injection moulded components selected from an industrial application. These parts are measured...... using an Optical Coordinate Measuring Machine (OCMM), which guarantees fast surface scans suitable for in line quality control. The uncertainty assessment of the measurements is calculated following the substitution method. To investigate the influence parameters in optical coordinate metrology two...

A Systems Engineering Approach to Electro-Mechanical Actuator Diagnostic and Prognostic Development

Data.gov (United States)

National Aeronautics and Space Administration — The authors have formulated a Comprehensive Systems Engineering approach to Electro-Mechanical Actuator (EMA) Prognostics and Health Management (PHM) system...

Modelling of micromachining of human tooth enamel by erbium laser radiation

Energy Technology Data Exchange (ETDEWEB)

Belikov, A V; Skrypnik, A V; Shatilova, K V [St. Petersburg National Research University of Information Technologies, Mechanics and Optics, St. Petersburg (Russian Federation)

2014-08-31

We consider a 3D cellular model of human tooth enamel and a photomechanical cellular model of enamel ablation by erbium laser radiation, taking into account the structural peculiarities of enamel, energy distribution in the laser beam cross section and attenuation of laser energy in biological tissue. The surface area of the texture in enamel is calculated after its micromachining by erbium laser radiation. The influence of the surface area on the bond strength of enamel with dental filling materials is discussed. A good correlation between the computer simulation of the total work of adhesion and experimentally measured bond strength between the dental filling material and the tooth enamel after its micromachining by means of YAG : Er laser radiation is attained. (laser biophotonics)

Modelling of micromachining of human tooth enamel by erbium laser radiation

International Nuclear Information System (INIS)

Belikov, A V; Skrypnik, A V; Shatilova, K V

2014-01-01

We consider a 3D cellular model of human tooth enamel and a photomechanical cellular model of enamel ablation by erbium laser radiation, taking into account the structural peculiarities of enamel, energy distribution in the laser beam cross section and attenuation of laser energy in biological tissue. The surface area of the texture in enamel is calculated after its micromachining by erbium laser radiation. The influence of the surface area on the bond strength of enamel with dental filling materials is discussed. A good correlation between the computer simulation of the total work of adhesion and experimentally measured bond strength between the dental filling material and the tooth enamel after its micromachining by means of YAG : Er laser radiation is attained. (laser biophotonics)

A Numerical Study of Scalable Cardiac Electro-Mechanical Solvers on HPC Architectures

Directory of Open Access Journals (Sweden)

Piero Colli Franzone

2018-04-01

Full Text Available We introduce and study some scalable domain decomposition preconditioners for cardiac electro-mechanical 3D simulations on parallel HPC (High Performance Computing architectures. The electro-mechanical model of the cardiac tissue is composed of four coupled sub-models: (1 the static finite elasticity equations for the transversely isotropic deformation of the cardiac tissue; (2 the active tension model describing the dynamics of the intracellular calcium, cross-bridge binding and myofilament tension; (3 the anisotropic Bidomain model describing the evolution of the intra- and extra-cellular potentials in the deforming cardiac tissue; and (4 the ionic membrane model describing the dynamics of ionic currents, gating variables, ionic concentrations and stretch-activated channels. This strongly coupled electro-mechanical model is discretized in time with a splitting semi-implicit technique and in space with isoparametric finite elements. The resulting scalable parallel solver is based on Multilevel Additive Schwarz preconditioners for the solution of the Bidomain system and on BDDC preconditioned Newton-Krylov solvers for the non-linear finite elasticity system. The results of several 3D parallel simulations show the scalability of both linear and non-linear solvers and their application to the study of both physiological excitation-contraction cardiac dynamics and re-entrant waves in the presence of different mechano-electrical feedbacks.

A micromachined membrane-based active probe for biomolecular mechanics measurement

Science.gov (United States)

Torun, H.; Sutanto, J.; Sarangapani, K. K.; Joseph, P.; Degertekin, F. L.; Zhu, C.

2007-04-01

A novel micromachined, membrane-based probe has been developed and fabricated as assays to enable parallel measurements. Each probe in the array can be individually actuated, and the membrane displacement can be measured with high resolution using an integrated diffraction-based optical interferometer. To illustrate its application in single-molecule mechanics experiments, this membrane probe was used to measure unbinding forces between L-selectin reconstituted in a polymer-cushioned lipid bilayer on the probe membrane and an antibody adsorbed on an atomic force microscope cantilever. Piconewton range forces between single pairs of interacting molecules were measured from the cantilever bending while using the membrane probe as an actuator. The integrated diffraction-based optical interferometer of the probe was demonstrated to have floor for frequencies as low as 3 Hz with a differential readout scheme. With soft probe membranes, this low noise level would be suitable for direct force measurements without the need for a cantilever. Furthermore, the probe membranes were shown to have 0.5 µm actuation range with a flat response up to 100 kHz, enabling measurements at fast speeds.

MicroElectroMechanical devices and fabrication technologies for radio-frequency analog signal processing

Science.gov (United States)

Young, Darrin Jun

The proliferation of wireless services creates a pressing need for compact and low cost RF transceivers. Modern sub-micron technologies provide the active components needed for miniaturization but fail to deliver high quality passives needed in oscillators and filters. This dissertation demonstrates procedures for adding high quality inductors and tunable capacitors to a standard silicon integrated circuits. Several voltage-controlled oscillators operating in the low Giga-Hertz range demonstrate the suitability of these components for high performance RF building blocks. Two low-temperature processes are described to add inductors and capacitors to silicon ICs. A 3-D coil geometry is used for the inductors rather than the conventional planar spiral to substantially reduce substrate loss and hence improve the quality factor and self-resonant frequency. Measured Q-factors at 1 GHz are 30 for a 4.8 nH device, 16 for 8.2 nH and 13.8 nH inductors. Several enhancements are proposed that are expected to result in a further improvement of the achievable Q-factor. This research investigates the design and fabrication of silicon-based IC-compatible high-Q tunable capacitors and inductors. The goal of this investigation is to develop a monolithic low phase noise radio-frequency voltage-controlled oscillator using these high-performance passive components for wireless communication applications. Monolithic VCOs will help the miniaturization of current radio transceivers, which offers a potential solution to achieve a single hand-held wireless phone with multistandard capabilities. IC-compatible micromachining fabrication technologies have been developed to realize on-chip high-Q RF tunable capacitors and 3-D coil inductors. The capacitors achieve a nominal capacitance value of 2 pF and can be tuned over 15% with 3 V. A quality factor over 60 has been measured at 1 GHz. 3-D coil inductors obtain values of 4.8 nH, 8.2 nH and 13.8 nH. At 1 GHz a Q factor of 30 has been achieved

Application of flexible micro temperature sensor in oxidative steam reforming by a methanol micro reformer.

Science.gov (United States)

Lee, Chi-Yuan; Lee, Shuo-Jen; Shen, Chia-Chieh; Yeh, Chuin-Tih; Chang, Chi-Chung; Lo, Yi-Man

2011-01-01

Advances in fuel cell applications reflect the ability of reformers to produce hydrogen. This work presents a flexible micro temperature sensor that is fabricated based on micro-electro-mechanical systems (MEMS) technology and integrated into a flat micro methanol reformer to observe the conditions inside that reformer. The micro temperature sensor has higher accuracy and sensitivity than a conventionally adopted thermocouple. Despite various micro temperature sensor applications, integrated micro reformers are still relatively new. This work proposes a novel method for integrating micro methanol reformers and micro temperature sensors, subsequently increasing the methanol conversion rate and the hydrogen production rate by varying the fuel supply rate and the water/methanol ratio. Importantly, the proposed micro temperature sensor adequately controls the interior temperature during oxidative steam reforming of methanol (OSRM), with the relevant parameters optimized as well.

Application of Flexible Micro Temperature Sensor in Oxidative Steam Reforming by a Methanol Micro Reformer

Directory of Open Access Journals (Sweden)

Yi-Man Lo

2011-02-01

Full Text Available Advances in fuel cell applications reflect the ability of reformers to produce hydrogen. This work presents a flexible micro temperature sensor that is fabricated based on micro-electro-mechanical systems (MEMS technology and integrated into a flat micro methanol reformer to observe the conditions inside that reformer. The micro temperature sensor has higher accuracy and sensitivity than a conventionally adopted thermocouple. Despite various micro temperature sensor applications, integrated micro reformers are still relatively new. This work proposes a novel method for integrating micro methanol reformers and micro temperature sensors, subsequently increasing the methanol conversion rate and the hydrogen production rate by varying the fuel supply rate and the water/methanol ratio. Importantly, the proposed micro temperature sensor adequately controls the interior temperature during oxidative steam reforming of methanol (OSRM, with the relevant parameters optimized as well.

Wear-resistance investigation of electro-screen coatings obtained using electroerosive powders of micro and nanofractions

Science.gov (United States)

Ageev, E. V.; Altukhov, A. Yu; Malneva, Yu V.; Novikov, A. N.

2018-03-01

The results of the wear resistance investigation of electro sparking coatings, applied using electrode material from electroerosive powders of hard alloy VK-8 (90%) with the addition of powder of high-speed steel of grade R6M5 (10%), are presented. Electro spark coatings were formed on samples of 30KhGSA steel using these electrodes and installation UR-121. The coefficient of friction and the wear rate of the surface of the sample and counterbody were measured on an automated friction machine “Tribometer” (CSM Instruments, Switzerland), controlled by a computer, according to the standard “ball-disk” test scheme.

Utilization of the UV laser with picosecond pulses for the formation of surface microstructures on elastomeric plastics

Science.gov (United States)

Antoszewski, B.; Tofil, S.; Scendo, M.; Tarelnik, W.

2017-08-01

Elastomeric plastics belong to a wide range of polymeric materials with special properties. They are used as construction material for seals and other components in many branches of industry and, in particular, in the biomedical industry, mechatronics, electronics and chemical equipment. The micromachining of surfaces of these materials can be used to build micro-flow, insulating, dispensing systems and chemical and biological reactors. The paper presents results of research on the effects of micro-machining of selected elastomeric plastics using a UV laser emitting picosecond pulses. The authors see the prospective application of the developed technology in the sealing technique in particular to shaping the sealing pieces co-operating with the surface of the element. The result of the study is meant to show parameters of the UV laser’s performance when producing typical components such as grooves, recesses for optimum ablation in terms of quality and productivity.

Nano/micro particle beam for ceramic deposition and mechanical etching

International Nuclear Information System (INIS)

Chun, Doo-Man; Kim, Min-Saeng; Kim, Min-Hyeng; Ahn, Sung-Hoon; Yeo, Jun-Cheol; Lee, Caroline Sunyong

2010-01-01

Nano/micro particle beam (NPB) is a newly developed ceramic deposition and mechanical etching process. Additive (deposition) and subtractive (mechanical etching) processes can be realized in one manufacturing process using ceramic nano/micro particles. Nano- or micro-sized powders are sprayed through the supersonic nozzle at room temperature and low vacuum conditions. According to the process conditions, the ceramic powder can be deposited on metal substrates without thermal damage, and mechanical etching can be conducted in the same process with a simple change of process conditions and powders. In the present work, ceramic aluminum oxide (Al 2 O 3 ) thin films were deposited on metal substrates. In addition, the glass substrate was etched using a mask to make small channels. Deposited and mechanically etched surface morphology, coating thickness and channel depth were investigated. The test results showed that the NPB provides a feasible additive and subtractive process using ceramic powders.

Thermo-mechanical efficiency of the bimetallic strip heat engine at the macro-scale and micro-scale

International Nuclear Information System (INIS)

Arnaud, A; Boughaleb, J; Monfray, S; Boeuf, F; Skotnicki, T; Cugat, O

2015-01-01

Bimetallic strip heat engines are energy harvesters that exploit the thermo-mechanical properties of bistable bimetallic membranes to convert heat into mechanical energy. They thus represent a solution to transform low-grade heat into electrical energy if the bimetallic membrane is coupled with an electro-mechanical transducer. The simplicity of these devices allows us to consider their miniaturization using MEMS fabrication techniques. In order to design and optimize these devices at the macro-scale and micro-scale, this article proposes an explanation of the origin of the thermal snap-through by giving the expressions of the constitutive equations of composite beams. This allows us to evaluate the capability of bimetallic strips to convert heat into mechanical energy whatever their size is, and to give the theoretical thermo-mechanical efficiencies which can be obtained with these harvesters. (paper)

On nonlinear thermo-electro-elasticity.

Science.gov (United States)

Mehnert, Markus; Hossain, Mokarram; Steinmann, Paul

2016-06-01

Electro-active polymers (EAPs) for large actuations are nowadays well-known and promising candidates for producing sensors, actuators and generators. In general, polymeric materials are sensitive to differential temperature histories. During experimental characterizations of EAPs under electro-mechanically coupled loads, it is difficult to maintain constant temperature not only because of an external differential temperature history but also because of the changes in internal temperature caused by the application of high electric loads. In this contribution, a thermo-electro-mechanically coupled constitutive framework is proposed based on the total energy approach. Departing from relevant laws of thermodynamics, thermodynamically consistent constitutive equations are formulated. To demonstrate the performance of the proposed thermo-electro-mechanically coupled framework, a frequently used non-homogeneous boundary-value problem, i.e. the extension and inflation of a cylindrical tube, is solved analytically. The results illustrate the influence of various thermo-electro-mechanical couplings.

Electro-spun PLA-PEG-yarns for tissue engineering applications

NARCIS (Netherlands)

Kruse, Magnus; Greuel, Marc; Kreimendahl, Franziska; Schneiders, Thomas; Bauer, Benedict; Gries, Thomas; Jockenhoevel, Stefan

2018-01-01

Electro-spinning is widely used in tissue-engineered applications mostly in form of non-woven structures. The development of e-spun yarn opens the door for textile fabrics which combine the micro to nanoscale dimension of electro-spun filaments with three-dimensional (3D) drapable textile fabrics.

Special Technology Area Review on Displays. Report of Department of Defense Advisory Group on Electron Devices Working Group C (Electro-Optics)

National Research Council Canada - National Science Library

Turnbach, Susan; Yang, Andrew; Hopper, Darrel G

2004-01-01

.... Display research spawns whole new fields as a result of its multidisciplinary nature; for example, the cathode ray tube enabled radar and television and the first commercially successful micro-electro-mechanical system (MEMS...

Mechanism of laser micro-adjustment

International Nuclear Information System (INIS)

Shen Hong

2008-01-01

Miniaturization is a requirement in engineering to produce competitive products in the field of optical and electronic industries. Laser micro-adjustment is a new and promising technology for sheet metal actuator systems. Efforts have been made to understand the mechanisms of metal plate forming using a laser heating source. Three mechanisms have been proposed for describing the laser forming processes in different scenarios, namely the temperature gradient mechanism (TGM), buckling mechanism and upsetting mechanism (UM). However, none of these mechanisms can fully describe the deformation mechanisms involved in laser micro-adjustment. Based on the thermal and elastoplastic analyses, a coupled TGM and UM are presented in this paper to illustrate the thermal mechanical behaviours of two-bridge actuators when applying a laser forming process. To validate the proposed coupling mechanism, numerical simulations are carried out and the corresponding results demonstrate the mechanism proposed. The mechanism of the micro-laser adjustment could be taken as a supplement to the laser forming process.

Electro-mechanical response of a 3D nerve bundle model to mechanical loads leading to axonal injury.

Science.gov (United States)

Cinelli, I; Destrade, M; Duffy, M; McHugh, P

2018-03-01

Traumatic brain injuries and damage are major causes of death and disability. We propose a 3D fully coupled electro-mechanical model of a nerve bundle to investigate the electrophysiological impairments due to trauma at the cellular level. The coupling is based on a thermal analogy of the neural electrical activity by using the finite element software Abaqus CAE 6.13-3. The model includes a real-time coupling, modulated threshold for spiking activation, and independent alteration of the electrical properties for each 3-layer fibre within a nerve bundle as a function of strain. Results of the coupled electro-mechanical model are validated with previously published experimental results of damaged axons. Here, the cases of compression and tension are simulated to induce (mild, moderate, and severe) damage at the nerve membrane of a nerve bundle, made of 4 fibres. Changes in strain, stress distribution, and neural activity are investigated for myelinated and unmyelinated nerve fibres, by considering the cases of an intact and of a traumatised nerve membrane. A fully coupled electro-mechanical modelling approach is established to provide insights into crucial aspects of neural activity at the cellular level due to traumatic brain injury. One of the key findings is the 3D distribution of residual stresses and strains at the membrane of each fibre due to mechanically induced electrophysiological impairments, and its impact on signal transmission. Copyright © 2017 John Wiley & Sons, Ltd.

Advanced technology trend survey of micromachines in Europe; Oshu ni okeru micromachine sentan gijutsu doko chosa

Energy Technology Data Exchange (ETDEWEB)

NONE

1996-02-01

In this research survey, the development trend of micromachine technology in Europe was surveyed, development level of micromachine technology of European companies was grasped, and practical application fields of their target were investigated. Technology development level of private companies in Japan`s national projects and practical application fields of Japan`s target were arranged. Trends of micromachine technology development are compared between Japanese companies and European companies. Among micromachine technology development projects in Europe, ``8520 MUST`` is a part of the ESPRIT Project. About 40,000 companies among about 170,000 companies in whole Europe are relating to the MUST Project. The main fields include the manufacturing technology, process control of machines, technology of safety, sensor technology in environmental fields, and automotive technology. The marketing fields of application include the automobile, military technology, home automation, industrial process, medical technology, environmental technology, and games. The results can be compared with the direction of research and development in Japan. 22 figs., 8 tabs.

Silicon photonic micro-ring resonators to sense strain and ultrasound

NARCIS (Netherlands)

Westerveld, W.J.

2014-01-01

We demonstrated that photonic micro-ring resonators can be used in micro-machined ultrasound microphones. This might cause a breakthrough in array transducers for ultrasonography; first because optical multiplexing allows array interrogation via one optical fiber and second because the

Modeling and Experimental Study on Characterization of Micromachined Thermal Gas Inertial Sensors

Directory of Open Access Journals (Sweden)

Yan Su

2010-09-01

Full Text Available Micromachined thermal gas inertial sensors based on heat convection are novel devices that compared with conventional micromachined inertial sensors offer the advantages of simple structures, easy fabrication, high shock resistance and good reliability by virtue of using a gaseous medium instead of a mechanical proof mass as key moving and sensing elements. This paper presents an analytical modeling for a micromachined thermal gas gyroscope integrated with signal conditioning. A simplified spring-damping model is utilized to characterize the behavior of the sensor. The model relies on the use of the fluid mechanics and heat transfer fundamentals and is validated using experimental data obtained from a test-device and simulation. Furthermore, the nonideal issues of the sensor are addressed from both the theoretical and experimental points of view. The nonlinear behavior demonstrated in experimental measurements is analyzed based on the model. It is concluded that the sources of nonlinearity are mainly attributable to the variable stiffness of the sensor system and the structural asymmetry due to nonideal fabrication.

Laser beam micro-milling of micro-channels in aerospace alloys

CERN Document Server

Ahmed, Naveed; Al-Ahmari, Abdulrahman

2017-01-01

This volume is greatly helpful to micro-machining and laser engineers as it offers obliging guidelines about the micro-channel fabrications through Nd:YAG laser beam micro-milling. The book also demonstrates how the laser beam micro-milling behaves when operating under wet conditions (under water), and explores what are the pros and cons of this hybrid technique. From the predictive mathematical models, the readers can easily estimate the resulting micro-channel size against the desired laser parametric combinations. The book considers micro-channels in three highly important research materials commonly used in aerospace industry: titanium alloy Ti-6Al-4V, nickel alloy Inconel 718 and aluminum alloy AA 2024. Therefore, the book is highly practicable in the fields of micro-channel heat exchangers, micro-channel aerospace turbine blades, micro-channel heat pipes, micro-coolers and micro-channel pulsating heat plates. These are frequently used in various industries such as aerospace, automotive, biomedical and m...

Monolithic micro-electro-thermal actuator integrated with a lateral displacement sensor

International Nuclear Information System (INIS)

Zhang, Yan; Choi, Young-Soo; Lee, Dong-Weon

2010-01-01

This paper presents monolithically fabricated horizontal thermal actuators integrated with piezoresistive sensors for in situ displacement sensing. The great advantage of a hybrid system is the use of closed feedback control for improving the transient response of a thermal actuator and positioning accuracy. It consists of two 'hot arms' made of doped silicon for Joule heating-induced thermal expansion when a current flow passes through them. The piezoresistor is embedded in the base of the 'cold arm' flexure for monitoring the tip deflection and for performance characterization. This 'cold arm' is not a part of the electrical circuit, which further improves the heat power efficiency and the measurement accuracy. Optimization is achieved mainly through modification of the geometry as well as the fabrication process. The fabricated micro-electro-thermal actuator with an integrated sensor is intended for use as a scanning cantilever in atomic force microscope or as a sample holder to drive the moving object through arrays configuration.

Circuit Design of Surface Acoustic Wave Based Micro Force Sensor

Directory of Open Access Journals (Sweden)

Yuanyuan Li

2014-01-01

Full Text Available Pressure sensors are commonly used in industrial production and mechanical system. However, resistance strain, piezoresistive sensor, and ceramic capacitive pressure sensors possess limitations, especially in micro force measurement. A surface acoustic wave (SAW based micro force sensor is designed in this paper, which is based on the theories of wavelet transform, SAW detection, and pierce oscillator circuits. Using lithium niobate as the basal material, a mathematical model is established to analyze the frequency, and a peripheral circuit is designed to measure the micro force. The SAW based micro force sensor is tested to show the reasonable design of detection circuit and the stability of frequency and amplitude.

Enhanced methanol electro-oxidation activity of Pt/MWCNTs electro-catalyst using manganese oxide deposited on MWCNTs

International Nuclear Information System (INIS)

Nouralishahi, Amideddin; Khodadadi, Abbas Ali; Mortazavi, Yadollah; Rashidi, Alimorad; Choolaei, Mohammadmehdi

2014-01-01

Highlights: • Promoting effects of manganese oxide (MnO x ) on methanol electro-oxidation over Pt/MWCNTs are studied. • 3.3 times higher activity and improved stability are observed on Pt/MnO x -MWCNTs in MOR. • Both hydrogen spill over and bi-functional mechanism are facilitated in presence of MnO x . • MnO x significantly enhances electrochemical active surface area and dispersion of Pt nanoparticles. • Proton conductivity of electrocatalyst layer is improved upon MnO x incorporation. - Abstract: Electro-oxidation of methanol on platinum nanoparticles supported on a nanocomposite of manganese oxide (MnO x ) and multi-wall carbon nanotubes (MWCNTs) is investigated. The morphology, structure, and chemical composition of the electro-catalysts are characterized by TEM, XRD, EDS, TGA, and H 2 -TPR. The electro-catalytic properties of electrodes are examined by cyclic voltammetry, CO-stripping, electrochemical impedance spectroscopy (EIS), and linear sweep voltammetry (LSV). Compared to Pt/MWCNTs, the Pt/MnO x -MWCNTs electro-catalyst exhibits about 3.3 times higher forward peak current density, during cyclic voltammetry, and 4.6 times higher exchange current density in methanol electro-oxidation reaction. In addition, deposition of manganese oxide onto MWCNTs dramatically increases the electrochemical active surface area from 29.7 for Pt/MWCNTs to 89.4 m 2 g −1 Pt for Pt/MnO x -MWCNTs. The results of long-term cyclic voltammetry show superior stability of Pt nanoparticles upon addition of manganese oxide to the support. Furthermore, the kinetics of formation of the chemisorbed OH groups improves upon manganese oxide incorporation. This leads to a lower onset potential of CO ads oxidation on Pt/MnO x -MWCNTs than on Pt/MWCNTs

Geneva University: Recent developments on 3D sensors

CERN Multimedia

Geneva University

2011-01-01

GENEVA UNIVERSITY Ecole de physique Département de physique nucléaire et corspusculaire 24, quai Ernest-Ansermet 1211 Genève 4 Tél.: (022) 379 62 73 Fax: (022) 379 69 92 Wednesday  2 November  2011 SEMINAIRE DE PHYSIQUE CORPUSCULAIRE at 17.00 hrs – Stückelberg Auditorium “Recent developments on 3D sensors” Dr Cinzia Da Via, University of Manchester, UK 3D are a novel kind of silicon radiation sensors where electrodes are micromachined inside the semiconductor substrate rather than being processed on its surfaces. This is possible by using Deep Reaction Io Etching, the same technique used to Fabricate MEMS (Micro-Electro-Mechanical Systems). Properties of this innovative design include extreme radiation hardness and high speed. Several Industrial partners and Academic institutes successfully joined together to accelerate the transition between the 3D R&D phase and Industrialization. This seminar will ...

Replication of micro and nano surface geometries

DEFF Research Database (Denmark)

Hansen, Hans Nørgaard; Hocken, R.J.; Tosello, Guido

2011-01-01

The paper describes the state-of-the-art in replication of surface texture and topography at micro and nano scale. The description includes replication of surfaces in polymers, metals and glass. Three different main technological areas enabled by surface replication processes are presented......: manufacture of net-shape micro/nano surfaces, tooling (i.e. master making), and surface quality control (metrology, inspection). Replication processes and methods as well as the metrology of surfaces to determine the degree of replication are presented and classified. Examples from various application areas...... are given including replication for surface texture measurements, surface roughness standards, manufacture of micro and nano structured functional surfaces, replicated surfaces for optical applications (e.g. optical gratings), and process chains based on combinations of repeated surface replication steps....

Electro/powder separation process

International Nuclear Information System (INIS)

Dunn, J.P.

1977-01-01

A report is presented to introduce the ELECTRO/POWDER process to the P/M Industry. The process effectively uses electrostatic forces to convey, sort, meter, and blend fine powders. The major advantages of this separating process consist of the processing of primary particles, low particle energy due to particle velocity control and the pattern of particle movement over the sieve (vertical oscillation of particles above the sieve aperture). The report briefly describes the forces involved in both mechanical and sieving devices, with major emphasis on the operating principles of this process. Sieve separation of particulates is basically the result of two physical separating processes which occur simultaneously or independently; separation (dispersion) of particulates from each other and the size separation by passage through fixed apertures. In order to accomplish this goal, mechanical sieving devices utilize various motions to induce shear forces between the sieve surface and the particulates, and between the particulates themselves. It is noted that the ELECTRO/POWDER process is making steady progress in becoming an industrial tool for sieving and feeding of fine particles. Its potential extends into both the blending and admixing of powders, either by incorporating two opposing feeders, one being charged with the opposite polarity or by modifying the ELECTRO/SIEVE to incorporate more than one input and a solid electrode to replace the sieve electrode

Physics-based signal processing algorithms for micromachined cantilever arrays

Science.gov (United States)

Candy, James V; Clague, David S; Lee, Christopher L; Rudd, Robert E; Burnham, Alan K; Tringe, Joseph W

2013-11-19

A method of using physics-based signal processing algorithms for micromachined cantilever arrays. The methods utilize deflection of a micromachined cantilever that represents the chemical, biological, or physical element being detected. One embodiment of the method comprises the steps of modeling the deflection of the micromachined cantilever producing a deflection model, sensing the deflection of the micromachined cantilever and producing a signal representing the deflection, and comparing the signal representing the deflection with the deflection model.

Fabrication of Biochips with Micro Fluidic Channels by Micro End-milling and Powder Blasting

Directory of Open Access Journals (Sweden)

Dong Sam Park

2008-02-01

Full Text Available For microfabrications of biochips with micro fluidic channels, a large number of microfabrication techniques based on silicon or glass-based Micro-Electro-Mechanical System (MEMS technologies were proposed in the last decade. In recent years, for low cost and mass production, polymer-based microfabrication techniques by microinjection molding and micro hot embossing have been proposed. These techniques, which require a proper photoresist, mask, UV light exposure, developing, and electroplating as a preprocess, are considered to have some problems. In this study, we propose a new microfabrication technology which consists of micro end-milling and powder blasting. This technique could be directly applied to fabricate the metal mold without any preprocesses. The metal mold with micro-channels is machined by micro end-milling, and then, burrs generated in the end-milling process are removed by powder blasting. From the experimental results, micro end-milling combined with powder blasting could be applied effectively for fabrication of the injection mold of biochips with micro fluidic channels.

Silicon micromachined vibrating gyroscopes

Science.gov (United States)

Voss, Ralf

1997-09-01

This work gives an overview of silicon micromachined vibrating gyroscopes. Market perspectives and fields of application are pointed out. The advantage of using silicon micromachining is discussed and estimations of the desired performance, especially for automobiles are given. The general principle of vibrating gyroscopes is explained. Vibrating silicon gyroscopes can be divided into seven classes. for each class the characteristic principle is presented and examples are given. Finally a specific sensor, based on a tuning fork for automotive applications with a sensitivity of 250(mu) V/degrees is described in detail.

Study of surfactant-added TMAH for applications in DRIE and wet etching-based micromachining

Science.gov (United States)

Tang, B.; Shikida, M.; Sato, K.; Pal, P.; Amakawa, H.; Hida, H.; Fukuzawa, K.

2010-06-01

In this paper, etching anisotropy is evaluated for a number of different crystallographic orientations of silicon in a 0.1 vol% Triton-X-100 added 25 wt% tetramethylammonium hydroxide (TMAH) solution using a silicon hemisphere. The research is primarily aimed at developing advanced applications of wet etching in microelectromechanical systems (MEMS). The etching process is carried out at different temperatures in the range of 61-81 °C. The etching results of silicon hemisphere and different shapes of three-dimensional structures in {1 0 0}- and {1 1 0}-Si surfaces are analyzed. Significantly important anisotropy, different from a traditional etchant (e.g. pure KOH and TMAH), is investigated to extend the applications of the wet etching process in silicon bulk micromachining. The similar etching behavior of exact and vicinal {1 1 0} and {1 1 1} planes in TMAH + Triton is utilized selectively to remove the scalloping from deep reactive-ion etching (DRIE) etched profiles. The direct application of the present research is demonstrated by fabricating a cylindrical lens with highly smooth etched surface finish. The smoothness of a micro-lens at different locations is measured qualitatively by a scanning electron microscope and quantitatively by an atomic force microscope. The present paper provides a simple and effective fabrication method of the silicon micro-lens for optical MEMS applications.

Novel fabrication method for 3D microstructures using surface-activated bonding and its application to micro-mechanical parts

Science.gov (United States)

Yamada, Takayuki; Takahashi, Mutsuya; Ozawa, Takashi; Tawara, Satoshi; Goto, Takayuki

2002-11-01

The purpose of this work is to demonstrate that a novel fabrication method for 3-D microstructures (FORMULA) is applicable to fabrication of micro mechanical parts with a large flexibility. This method is a kind of layer manufacturing method of thin films for metallic or dielectric microstructures using surface-activated bonding (SAB). The bonding interfaces of thin films are investigated by transmission electron microscope (TEM). Voids were observed at the interfaces of both pure aluminum films and Al-Cu alloy films. The ratio of void on the Al-Cu/Al-Cu interface is much larger than that of Al/Al interface, although the films have the same surface roughness of 3nm in Ra (average roughness). And approximately 10nm-thick amorphous intermediate layers were found at the interfaces. Furthermore, we have fabricated a micro gear of 900μm in diameter and 200μm in height, which is about ten times as large as our previous test pieces. Overhung structures such as a bridge structure and a cantilever were also fabricated without supporting layers beneath them.

Effects of laser shock peening with contacting foil on micro laser texturing surface of Ti6Al4V

Science.gov (United States)

Dai, Fengze; Zhang, Zidong; Ren, Xudong; Lu, Jinzhong; Huang, Shu

2018-02-01

Ti6Al4V samples with micro-dimple arrays were subjected to laser shock peening in contact with foil (HCLSP). The surface roughness, micro-hardness, the residual stress distribution and the surface morphology of the micro-dimple arrays were studied to evaluate the effects of HCLSP. Moreover, the surface topography of the foils in contact was also analyzed. The gap existence between the foil and the to-be treated surface led the mechanism of HCLSP to be different compared to regular laser shock peening. The surface roughness reduction, the work-hardening effects, the compressive residual stress and the micro crack enclosure were achieved. A simplified ball-hitting-surface model was utilized to analyze the HCLSP impact. The model could well explain the experimental results. When treated by the HCLSP with H62 foil at the laser power density of 4.24 GW/cm2, the Ti6Al4V samples with micro-dimple arrays exhibit well surface topography and mechanical performance.

Cellulose Electro-Active Paper: From Discovery to Technology Applications

Science.gov (United States)

Abas, Zafar; Kim, Heung Soo; Kim, Jaehwan; Kim, Joo-Hyung

2014-09-01

Cellulose electro-active paper (EAPap) is an attractive material of electro-active polymers (EAPs) family due to its smart characteristics. EAPap is thin cellulose film coated with metal electrodes on both sides. Its large displacement output, low actuation voltage and low power consumption can be used for biomimetic sensors/actuators and electromechanical system. Because cellulose EAPap is ultra-lightweight, easy to manufacture, inexpensive, biocompatible, and biodegradable, it has been employed for many applications such as bending actuator, vibration sensor, artificial muscle, flexible speaker, and can be advantageous in areas such as micro-insect robots, micro-flying objects, microelectromechanical systems, biosensors, and flexible displays.

MicroCT Analysis of Micro-Nano Titanium Implant Surface on the Osseointegration.

Science.gov (United States)

Ban, Jaesam; Kang, Seongsoo; Kim, Jihyun; Lee, Kwangmin; Hyunpil, Lim; Vang, Mongsook; Yang, Hongso; Oh, Gyejeong; Kim, Hyunseung; Hwang, Gabwoon; Jung, Yongho; Lee, Kyungku; Park, Sangwon; Yunl, Kwidug

2015-01-01

This study was to investigate the effects of micro-nano titanium implant surface on the osseointegration. A total of 36 screw-shaped implants were used. The implant surfaces were classified into 3 groups (n = 12): machined surface (M group), nanosurface which is nanotube formation on the machined surface (MA group) and nano-micro surface which is nanotube formation on the RBM surface (RA group). Anodic oxidation was performed at a 20 V for 10 min with 1 M H3PO4 and 1.5 wt% HF solutions. The implants were installed on the humerus on 6 beagles. After 4 and 12 weeks, the morphometric analysis with micro CT (skyscan 1172, SKYSCAN, Antwerpen, Belgium) was done. The data were statistically analyzed with two-way ANOVA. Bone mineral density and bone volume were significantly increased depending on time. RA group showed the highest bone mineral density and bone volume at 4 weeks and 12 weeks significantly. It indicated that nano-micro titanium implant surface showed faster and more mature osseointegration.

Fabrication of micro- and nano-structured materials using mask-less processes

International Nuclear Information System (INIS)

Roy, Sudipta

2007-01-01

Micro- and nano-scale devices are used in electronics, micro-electro- mechanical, bio-analytical and medical components. An essential step for the fabrication of such small scale devices is photolithography. Photolithography requires a master mask to transfer micrometre or sub-micrometre scale patterns onto a substrate. The requirement of a physical, rigid mask can impede progress in applications which require rapid prototyping, flexible substrates, multiple alignment and 3D fabrication. Alternative technologies, which do not require the use of a physical mask, are suitable for these applications. In this paper mask-less methods of micro- and nano-scale fabrication have been discussed. The most common technique, which is the laser direct imaging (LDI), technique has been applied to fabricate micrometre scale structures on printed circuit boards, glass and epoxy. LDI can be combined with chemical methods to deposit metals, inorganic materials as well as some organic entities at the micrometre scale. Inkjet technology can be used to fabricate micrometre patterns of etch resists, organic transistors as well as arrays for bioanalysis. Electrohydrodynamic atomisation is used to fabricate micrometre scale ceramic features. Electrochemical methodologies offer a variety of technical solutions for micro- and nano-fabrication owing to the fact that electron charge transfer can be constrained to a solid-liquid interface. Electrochemical printing is an adaptation of inkjet printing which can be used for rapid prototyping of metallic circuits. Micro-machining using nano-second voltage pulses have been used to fabricate high precision features on metals and semiconductors. Optimisation of reactor, electrochemistry and fluid flow (EnFACE) has also been employed to transfer micrometre scale patterns on a copper substrate. Nano-scale features have been fabricated by using specialised tools such as scanning tunnelling microscopy, atomic force microscopy and focused ion beam. The

Nano-structured 3D Electrodes for Li-ion Micro-batteries

OpenAIRE

Perre, Emilie

2010-01-01

A new challenging application for Li-ion battery has arisen from the rapid development of micro-electronics. Powering Micro-ElectroMechanical Systems (MEMS) such as autonomous smart-dust nodes using conventional Li-ion batteries is not possible. It is not only new batteries based on new materials but there is also a need of modifying the actual battery design. In this context, the conception of 3D nano-architectured Li-ion batteries is explored. There are several micro-battery concepts that a...

DLC nano-dot surfaces for tribological applications in MEMS devices

Energy Technology Data Exchange (ETDEWEB)

Singh, R. Arvind; Na, Kyounghwan [Nano-Bio Research Center, Korea Institute of Science and Technology, 39-1, Hawolgok-dong, Seongbuk-gu, Seoul 136-791 (Korea, Republic of); Yi, Jin Woo; Lee, Kwang-Ryeol [Computational Science Center, Korea Institute of Science and Technology, 39-1, Hawolgok-dong, Seongbuk-gu, Seoul 136-791 (Korea, Republic of); Yoon, Eui-Sung, E-mail: esyoon@kist.re.kr [Nano-Bio Research Center, Korea Institute of Science and Technology, 39-1, Hawolgok-dong, Seongbuk-gu, Seoul 136-791 (Korea, Republic of)

2011-02-01

With the invention of miniaturized devices like micro-electro-mechanical systems (MEMS), tribological studies at micro/nano-scale have gained importance. These studies are directed towards understanding the interactions between surfaces at micro/nano-scales, under relative motion. In MEMS devices, the critical forces, namely adhesion and friction restrict the smooth operation of the elements that are in relative motion. These miniaturized devices are traditionally made from silicon (Si), whose tribological properties are not good. In this paper, we present a short investigation of nano- and micro-tribological properties of diamond-like carbon (DLC) nano-dot surfaces. The investigation was undertaken to evaluate the potential of these surfaces for their possible application to the miniaturized devices. The tribological evaluation of the DLC nano-dot surfaces was done in comparison with bare Si (1 0 0) surfaces and DLC coated silicon surfaces. A commercial atomic force microscope (AFM) was used to measure adhesion and friction properties of the test materials at the nano-scale, whereas a custom-built micro-tribotester was used to measure their micro-friction property. Results showed that the DLC nano-dot surfaces exhibited superior tribological properties with the lowest values of adhesion force, and friction force both at the nano- and micro-scales, when compared to the bare Si (1 0 0) surfaces and DLC coated silicon surfaces. In addition, the DLC nano-dot surfaces showed no observable wear at the micro-scale, unlike the other two test materials. The superior tribological performance of the DLC nano-dot surfaces is attributed to their hydrophobic nature and the reduced area of contact projected by them.

DLC nano-dot surfaces for tribological applications in MEMS devices

International Nuclear Information System (INIS)

Singh, R. Arvind; Na, Kyounghwan; Yi, Jin Woo; Lee, Kwang-Ryeol; Yoon, Eui-Sung

2011-01-01

With the invention of miniaturized devices like micro-electro-mechanical systems (MEMS), tribological studies at micro/nano-scale have gained importance. These studies are directed towards understanding the interactions between surfaces at micro/nano-scales, under relative motion. In MEMS devices, the critical forces, namely adhesion and friction restrict the smooth operation of the elements that are in relative motion. These miniaturized devices are traditionally made from silicon (Si), whose tribological properties are not good. In this paper, we present a short investigation of nano- and micro-tribological properties of diamond-like carbon (DLC) nano-dot surfaces. The investigation was undertaken to evaluate the potential of these surfaces for their possible application to the miniaturized devices. The tribological evaluation of the DLC nano-dot surfaces was done in comparison with bare Si (1 0 0) surfaces and DLC coated silicon surfaces. A commercial atomic force microscope (AFM) was used to measure adhesion and friction properties of the test materials at the nano-scale, whereas a custom-built micro-tribotester was used to measure their micro-friction property. Results showed that the DLC nano-dot surfaces exhibited superior tribological properties with the lowest values of adhesion force, and friction force both at the nano- and micro-scales, when compared to the bare Si (1 0 0) surfaces and DLC coated silicon surfaces. In addition, the DLC nano-dot surfaces showed no observable wear at the micro-scale, unlike the other two test materials. The superior tribological performance of the DLC nano-dot surfaces is attributed to their hydrophobic nature and the reduced area of contact projected by them.

Multi-category micro-milling tool wear monitoring with continuous hidden Markov models

Science.gov (United States)

Zhu, Kunpeng; Wong, Yoke San; Hong, Geok Soon

2009-02-01

In-process monitoring of tool conditions is important in micro-machining due to the high precision requirement and high tool wear rate. Tool condition monitoring in micro-machining poses new challenges compared to conventional machining. In this paper, a multi-category classification approach is proposed for tool flank wear state identification in micro-milling. Continuous Hidden Markov models (HMMs) are adapted for modeling of the tool wear process in micro-milling, and estimation of the tool wear state given the cutting force features. For a noise-robust approach, the HMM outputs are connected via a medium filter to minimize the tool state before entry into the next state due to high noise level. A detailed study on the selection of HMM structures for tool condition monitoring (TCM) is presented. Case studies on the tool state estimation in the micro-milling of pure copper and steel demonstrate the effectiveness and potential of these methods.

Hybrid nanocomposites based on electroactive hydrogels and cellulose nanocrystals for high-sensitivity electro-mechanical underwater actuation

Science.gov (United States)

Santaniello, Tommaso; Migliorini, Lorenzo; Locatelli, Erica; Monaco, Ilaria; Yan, Yunsong; Lenardi, Cristina; Comes Franchini, Mauro; Milani, Paolo

2017-08-01

We report the synthesis, fabrication and characterization of a hybrid hydrogel/cellulose nanocomposite, which exhibits high-performance electro-mechanical underwater actuation and high sensitivity in response to electrical stimuli below the standard potential of water electrolysis. The macromolecular structure of the material is constituted by an electroactive hydrogel, obtained through a photo-polymerization reaction with the use of three vinylic co-monomers: Na-4-vinylbenzenesulfonate, 2-hydroxyethylmethacrylate, and acrylonitrile. Different amounts (from 0.1% to 1.4% w/w) of biodegradable cellulose nanocrystals (CNCs) with sulfonate surface groups, obtained through the acidic hydrolysis of sulphite pulp lapsheets, are physically incorporated into the gel matrix during the synthesis step. Freestanding thin films of the nanocomposites are molded, and their swelling, mechanical and responsive properties are fully characterized. We observed that the embedding of the CNCs enhanced both the material Young’s modulus and its sensitivity to the applied electric field in the sub-volt regime (down to 5 mV cm-1). A demonstrator integrating multiple actuators that cooperatively bend together, mimicking the motion of an electro-valve, is also prototyped and tested. The presented nanocomposite is suitable for the development of soft smart components for bio-robotic applications and cells-based and bio-hybrid fluidic devices fabrication.

Electro Conductive Alumina Nanocomposites From Different Alumina-Carbides Mixtures

Directory of Open Access Journals (Sweden)

Díaz Luis A.

2016-01-01

SiC whiskers reinforced electrically conductive ceramic compositions provide a fully dense material with optimal mechanical properties. The capability of electro-discharge machining obtains good surface quality, chip-free edges, dimensional accuracy and complex shapes. The fracture toughness is improved two to three fold over individual ceramic components. Strength and hardness is also increased. Some composites were tested as a cutting tool to machine IN-718 nickel-base superalloy industrial laminating cylinders. The composites were formed and electro-discharge machined to a standard size cutting insert.

Polymer Coatings Reduce Electro-osmosis

Science.gov (United States)

Herren, Blair J.; Snyder, Robert; Shafer, Steven G.; Harris, J. Milton; Van Alstine, James M.

1989-01-01

Poly(ethylene glycol) film controls electrostatic potential. Electro-osmosis in quartz or glass chambers reduced or reversed by coating inside surface of chambers with monomacromolecular layers of poly(ethylene glycol). Stable over long times. Electrostatic potential across surface of untreated glass or plastic chamber used in electro-phoresis is negative and attracts cations in aqueous electrolyte. Cations solvated, entrains flow of electrolyte migrating toward cathode. Electro-osmotic flow interferes with desired electrophoresis of particles suspended in electrolyte. Polymer coats nontoxic, transparent, and neutral, advantageous for use in electrophoresis.

Advanced characterization of carrier profiles in germanium using micro-machined contact probes

DEFF Research Database (Denmark)

Clarysse, T.; Konttinen, M.; Parmentier, B.

2012-01-01

of new concepts based on micro machined, closely spaced contact probes (10 μm pitch). When using four probes to perform sheet resistance measurements, a quantitative carrier profile extraction based on the evolution of the sheet resistance versus depth along a beveled surface is obtained. Considering...... the properties of both approaches on Al+ implants in germanium with different anneal treatments....

Augmentation of peristaltic microflows through electro-osmotic mechanisms

International Nuclear Information System (INIS)

Chakraborty, Suman

2006-01-01

The present work aims to theoretically establish that the employment of an axial electric field can substantially augment the rate of microfluidic transport occurring in peristaltic microtubes. For theoretical analysis, shape evolution of the tube is taken to be arbitrary, except for the fact that the characteristic wavelength is assumed to be significantly greater than the average radius of cross section. First, expressions for the velocity profile within the tube are derived and are subsequently utilized to obtain variations in the net flow rate across the same, as a function of the pertinent system parameters. Subsequently, the modes of interaction between the electro-osmotic and peristaltic mechanisms are established through the variations in the time-averaged flow rates for zero pressure rise and the pressure rise for zero time-averaged flow rates, as expressed in terms of the occlusion number, characteristic electro-osmotic velocity and the peristaltic wave speed. From the simulation predictions, it is suggested that a judicious combination of peristalsis and an axial electrokinetic body force can drastically enhance the time-averaged flow rate, provided that the occlusion number is relatively small

Strain relief InGaN/GaN MQW micro-pillars for high brightness LEDs

KAUST Repository

Shen, Chao

2013-01-01

Micro-structured group-III-nitrides are considered as promising strain relief structures for high efficiency solid state lighting. In this work, the strain field in InGaN/GaN multi-quantum wells (MQWs) micro-pillars is investigated using micro-Raman spectroscopy and the design of micro-pillars were studied experimentally. We distinguished the strained and strain-relieved signatures of the GaN layer from the E2 phonon peak split from the Raman scattering signatures at 572 cm-1 and 568 cm-1, respectively. The extent of strain relief is examined considering the height and size of micro-pillars fabricated using focused ion beam (FIB) micro-machining technique. A significant strain relief can be achieved when one micro-machined through the entire epi-layers, 3 μm in our study. The dependence of strain relief on micro-pillar diameter (D) suggested that micro-pillar with D < 3 μm showed high degree of strain relief. Our results shed new insights into designing strain-relieved InGaN/GaN microstructures for high brightness light emitting diode arrays. © 2013 IEEE.

Fabrication of a novel quartz micromachined gyroscope

Science.gov (United States)

Xie, Liqiang; Xing, Jianchun; Wang, Haoxu; Wu, Xuezhong

2015-04-01

A novel quartz micromachined gyroscope is proposed in this paper. The novel gyroscope is realized by quartz anisotropic wet etching and 3-dimensional electrodes deposition. In the quartz wet etching process, the quality of Cr/Au mask films affecting the process are studied by experiment. An excellent mask film with 100 Å Cr and 2000 Å Au is achieved by optimization of experimental parameters. Crystal facets after etching seriously affect the following sidewall electrodes deposition process and the structure's mechanical behaviours. Removal of crystal facets is successfully implemented by increasing etching time based on etching rate ratios between facets and crystal planes. In the electrodes deposition process, an aperture mask evaporation method is employed to prepare electrodes on 3-dimensional surfaces of the gyroscope structure. The alignments among the aperture masks are realized by the ABM™ Mask Aligner System. Based on the processes described above, a z-axis quartz gyroscope is fabricated successfully.

Millimeter length micromachining using a heavy ion nuclear microprobe with standard magnetic scanning

International Nuclear Information System (INIS)

Nesprías, F.; Debray, M.E.; Davidson, J.; Kreiner, A.J.

2013-01-01

In order to increase the scanning length of our microprobe, we have developed an irradiation procedure suitable for use in any nuclear microprobe, extending at least up to 400% the length of our heavy ion direct writing facility using standard magnetic exploration. Although this method is limited to patterns of a few millimeters in only one direction, it is useful for the manufacture of curved waveguides, optical devices such Mach–Zehnder modulators, directional couplers as well as channels for micro-fluidic applications. As an example, this technique was applied to the fabrication of 3 mm 3D-Mach–Zehnder modulators in lithium niobate with short Y input/output branches and long shaped parallel-capacitor control electrodes. To extend and improve the quality of the machined structures we developed new scanning control software in LabView™ platform. The new code supports an external dose normalization, electrostatic beam blanking and is capable of scanning figures at 16 bit resolution using a National Instruments™ PCI-6731 High-Speed I/O card. A deep and vertical micromachining process using swift 35 Cl ions 70 MeV bombarding energy and direct write patterning was performed on LiNbO 3 , a material which exhibits a strong natural anisotropy to conventional etching. The micromachined structures show the feasibility of this method for manufacturing micro-fluidic channels as well

Millimeter length micromachining using a heavy ion nuclear microprobe with standard magnetic scanning

Energy Technology Data Exchange (ETDEWEB)

Nesprías, F. [Gerencia de Investigación y Aplicaciones, Comisión Nacional de Energía Atómica, Av. Gral Paz 1499 (1650), San Martín, Buenos Aires (Argentina); Debray, M.E., E-mail: debray@tandar.cnea.gov.ar [Gerencia de Investigación y Aplicaciones, Comisión Nacional de Energía Atómica, Av. Gral Paz 1499 (1650), San Martín, Buenos Aires (Argentina); Escuela de Ciencia y Tecnología. Universidad Nacional de Gral. San Martín, M. De Irigoyen 3100 (1650), San Martín, Buenos Aires (Argentina); Davidson, J. [Gerencia de Investigación y Aplicaciones, Comisión Nacional de Energía Atómica, Av. Gral Paz 1499 (1650), San Martín, Buenos Aires (Argentina); CONICET, Avda. Rivadavia 1917 (C1033AAJ), Ciudad Autónoma de Buenos Aires (Argentina); Kreiner, A.J. [Gerencia de Investigación y Aplicaciones, Comisión Nacional de Energía Atómica, Av. Gral Paz 1499 (1650), San Martín, Buenos Aires (Argentina); Escuela de Ciencia y Tecnología. Universidad Nacional de Gral. San Martín, M. De Irigoyen 3100 (1650), San Martín, Buenos Aires (Argentina); CONICET, Avda. Rivadavia 1917 (C1033AAJ), Ciudad Autónoma de Buenos Aires (Argentina); and others

2013-04-01

In order to increase the scanning length of our microprobe, we have developed an irradiation procedure suitable for use in any nuclear microprobe, extending at least up to 400% the length of our heavy ion direct writing facility using standard magnetic exploration. Although this method is limited to patterns of a few millimeters in only one direction, it is useful for the manufacture of curved waveguides, optical devices such Mach–Zehnder modulators, directional couplers as well as channels for micro-fluidic applications. As an example, this technique was applied to the fabrication of 3 mm 3D-Mach–Zehnder modulators in lithium niobate with short Y input/output branches and long shaped parallel-capacitor control electrodes. To extend and improve the quality of the machined structures we developed new scanning control software in LabView™ platform. The new code supports an external dose normalization, electrostatic beam blanking and is capable of scanning figures at 16 bit resolution using a National Instruments™ PCI-6731 High-Speed I/O card. A deep and vertical micromachining process using swift {sup 35}Cl ions 70 MeV bombarding energy and direct write patterning was performed on LiNbO{sub 3}, a material which exhibits a strong natural anisotropy to conventional etching. The micromachined structures show the feasibility of this method for manufacturing micro-fluidic channels as well.

The influence of electric charge transferred during electro-mechanical reshaping on mechanical behavior of cartilage

Science.gov (United States)

Protsenko, Dimitry E.; Lim, Amanda; Wu, Edward C.; Manuel, Cyrus; Wong, Brian J. F.

2011-03-01

Electromechanical reshaping (EMR) of cartilage has been suggested as an alternative to the classical surgical techniques of modifying the shape of facial cartilages. The method is based on exposure of mechanically deformed cartilaginous tissue to a low level electric field. Electro-chemical reactions within the tissue lead to reduction of internal stress, and establishment of a new equilibrium shape. The same reactions offset the electric charge balance between collagen and proteoglycan matrix and interstitial fluid responsible for maintenance of cartilage mechanical properties. The objective of this study was to investigate correlation between the electric charge transferred during EMR and equilibrium elastic modulus. We used a finite element model based on the triphasic theory of cartilage mechanical properties to study how electric charges transferred in the electro-chemical reactions in cartilage can change its mechanical responses to step displacements in unconfined compression. The concentrations of the ions, the strain field and the fluid and ion velocities within the specimen subject to an applied mechanical deformation were estimated and apparent elastic modulus (the ratio of the equilibrium axial stress to the axial strain) was calculated as a function of transferred charge. The results from numerical calculations showed that the apparent elastic modulus decreases with increase in electric charge transfer. To compare numerical model with experimental observation we measured elastic modulus of cartilage as a function of electric charge transferred in electric circuit during EMR. Good correlation between experimental and theoretical data suggests that electric charge disbalance is responsible for alteration of cartilage mechanical properties.

Microfabricated Chemical Sensors for Safety and Emission Control Applications

Science.gov (United States)

Hunter, G. W.; Neudeck, P. G.; Chen, L.-Y.; Knight, D.; Liu, C. C.; Wu, Q. H.

1998-01-01

Chemical sensor technology is being developed for leak detection, emission monitoring, and fire safety applications. The development of these sensors is based on progress in two types of technology: 1) Micromachining and microfabrication (MicroElectroMechanical Systems (MEMS)-based) technology to fabricate miniaturized sensors. 2) The development of high temperature semiconductors, especially silicon carbide. Using these technologies, sensors to measure hydrogen, hydrocarbons, nitrogen oxides, carbon monoxide, oxygen, and carbon dioxide are being developed. A description is given of each sensor type and its present stage of development. It is concluded that microfabricated sensor technology has significant potential for use in a range of aerospace applications.

Microfabrication in free-standing gallium nitride using UV laser micromachining

International Nuclear Information System (INIS)

Gu, E.; Howard, H.; Conneely, A.; O'Connor, G.M.; Illy, E.K.; Knowles, M.R.H.; Edwards, P.R.; Martin, R.W.; Watson, I.M.; Dawson, M.D.

2006-01-01

Gallium nitride (GaN) and related alloys are important semiconductor materials for fabricating novel photonic devices such as ultraviolet (UV) light-emitting diodes (LEDs) and vertical cavity surface-emitting lasers (VCSELs). Recent technical advances have made free-standing GaN substrates available and affordable. However, these materials are strongly resistant to wet chemical etching and also, low etch rates restrict the use of dry etching. Thus, to develop alternative high-resolution processing for these materials is increasingly important. In this paper, we report the fabrication of microstructures in free-standing GaN using pulsed UV lasers. An effective method was first developed to remove the re-deposited materials due to the laser machining. In order to achieve controllable machining and high resolution in GaN, machining parameters were carefully optimised. Under the optimised conditions, precision features such as holes (through holes, blind or tapered holes) on a tens of micrometer length scale have been machined. To fabricate micro-trenches in GaN with vertical sidewalls and a flat bottom, different process strategies of laser machining were tested and optimised. Using this technique, we have successfully fabricated high-quality micro-trenches in free-standing GaN with various widths and depths. The approach combining UV laser micromachining and other processes is also discussed. Our results demonstrate that the pulsed UV laser is a powerful tool for fabricating precision microstructures and devices in gallium nitride

Cellulose Electro-Active Paper: From Discovery to Technology Applications

Directory of Open Access Journals (Sweden)

Zafar eAbas

2014-09-01

Full Text Available Cellulose electro-active paper (EAPap is an attractive material of electro-active polymers (EAPs family due to its smart characteristics. EAPap is thin cellulose film coated with metal electrodes on both sides. Its large displacement output, low actuation voltage and low power consumption can be used for biomimetic sensors/actuators and electromechanical system. Because cellulose EAPap is ultra-lightweight, easy to manufacture, inexpensive, biocompatible, and biodegradable, it has been employed for many applications such as bending actuator, vibration sensor, artificial muscle, flexible speaker, and can be advantageous in areas such as micro-insect robots, micro-flying objects, microelectromechanical systems, biosensors, and flexible displays.

Design and Performance of a Focus-Detection System for Use in Laser Micromachining

Directory of Open Access Journals (Sweden)

Binh Xuan Cao

2016-01-01

Full Text Available We describe a new approach for locating the focal position in laser micromachining. This approach is based on a feedback system that uses a charge-coupled device (CCD camera, a beam splitter, and a mirror to focus a laser beam on the surface of a work piece. We tested the proposed method for locating the focal position by using Zemax simulations, as well as physically carrying out drilling processes. Compared with conventional methods, this approach is advantageous because: the implementation is simple, the specimen can easily be positioned at the focal position, and the dynamically adjustable scan amplitude and the CCD camera can be used to monitor the laser beam’s profile. The proposed technique will be particularly useful for locating the focal position on any surface in laser micromachining.

Micro-machined high-frequency (80 MHz) PZT thick film linear arrays.

Science.gov (United States)

Zhou, Qifa; Wu, Dawei; Liu, Changgeng; Zhu, Benpeng; Djuth, Frank; Shung, K

2010-10-01

This paper presents the development of a micromachined high-frequency linear array using PZT piezoelectric thick films. The linear array has 32 elements with an element width of 24 μm and an element length of 4 mm. Array elements were fabricated by deep reactive ion etching of PZT thick films, which were prepared from spin-coating of PZT sol-gel composite. Detailed fabrication processes, especially PZT thick film etching conditions and a novel transferring-and-etching method, are presented and discussed. Array designs were evaluated by simulation. Experimental measurements show that the array had a center frequency of 80 MHz and a fractional bandwidth (-6 dB) of 60%. An insertion loss of -41 dB and adjacent element crosstalk of -21 dB were found at the center frequency.

Micro-Mechanical Temperature Sensors

DEFF Research Database (Denmark)

Larsen, Tom

Temperature is the most frequently measured physical quantity in the world. The field of thermometry is therefore constantly evolving towards better temperature sensors and better temperature measurements. The aim of this Ph.D. project was to improve an existing type of micro-mechanical temperature...... sensor or to develop a new one. Two types of micro-mechanical temperature sensors have been studied: Bilayer cantilevers and string-like beam resonators. Both sensor types utilize thermally generated stress. Bilayer cantilevers are frequently used as temperature sensors at the micro-scale, and the goal....... The reduced sensitivity was due to initial bending of the cantilevers and poor adhesion between the two cantilever materials. No further attempts were made to improve the sensitivity of bilayer cantilevers. The concept of using string-like resonators as temperature sensors has, for the first time, been...

Adhesion aspects in MEMS/NEMS

CERN Document Server

Kim, Seong H; Mittal, Kash L

2012-01-01

Phenomena associated with the adhesion interaction of surfaces have been a critical aspect of micro- and nanosystem development and performance since the first MicroElectroMechanicalSystems(MEMS) were fabricated. These phenomena are ubiquitous in nature and are present in all systems, however MEMS devices are particularly sensitive to their effects owing to their small size and limited actuation force that can be generated. Extension of MEMS technology concepts to the nanoscale and development of NanoElectroMechanicalSystems(NEMS) will result in systems even more strongly influenced by surface

Studies of cell biomechanics with surface micro-/nano-technology

International Nuclear Information System (INIS)

Wang Dong; Zhang Wei; Jiang Xingyu

2011-01-01

We report the recent progress in our studies of cell biology using micro-/nano-technology. Cells have a size of several to tens of microns, which makes them easily manipulated by micro-/nano-technology. The shape of the cell influences the alignment of the actin cytoskeleton, which bears the main forces of the cell, maintains the shape,and mediates a series of biochemical reactions. We invented a stretching device and studied the real-time actin filament dynamics under stretch. We found that one stretch cycle shortened the actin filaments and promoted their reassemble process. Cell migration is a complex mechanical process. We found that cell geometry determines the cell polarity and migration direction. We fabricated three-dimensional surfaces to mimic the topography in vivo, and further built a cell culture model by integrating the three-dimensional surface, microfluidics, cell patterning,and coculturing of multiple cell types. We also investigated the neuronal guidance by surface patterning. (authors)

Cyclic voltammetric study of electro-oxidation of methanol on platinum electrode in acidic and neutral media

International Nuclear Information System (INIS)

Khan, A.S.A.; Ahmed, R.; Mirza, M.L.

2007-01-01

The electro-oxidation of methanol on electrochemically treated platinum foil was investigated in acidic and neutral media for comparison of cyclic voltammetric characteristics and elucidation of mechanism of electro-oxidation of methanol. The surface area and roughness factor of platinum electrode was calculated. The electro-oxidation of mathanol is an irreversible process giving. anodic peaks in both anodic and cathodic sweep. The characteristic peaks of electrooxidation of methanol appeared at almost the same potential region in both acidic and neutral media. In neutral medium, certain additional cathodic/anodic peaks appeared which were confirmed to arise by the reduction/oxidation of hydrogen ions. The exchange current density and heterogeneous electron transfer rate constant was higher in neutral medium as. compared with acidic medium. The thermodynamic parameters delta H, delta S, and delta G/sub 298/ were calculated. The values of delta H and delta G/sub 298/were positive which indicated that the process of electro-oxidation of methanol is an endothermic and nonspontaneous. The mechanism of electro-oxidation of methanol was same in both acidic and neutral media involving the formation of various adsorbed intermediate species through dissociative adsorption steps leading to the formation of Co adsorbed radicals, which are removed. during interaction with adsorbed hydrous oxides provided by the oxidation of adsorbed water molecules. The higher rate of electro-oxidation of methanol in neutral medium was interpreted in the tight of electrochemical mechanism and was attributed to the presence of comparatively small amount of hydrogen ions only along the surface of working electrode, which are produced during electro-oxidation of methanol. (author)

Electro-mechanical control of an on-chip optical beam splitter containing an embedded quantum emitter

Science.gov (United States)

Bishop, Z. K.; Foster, A. P.; Royall, B.; Bentham, C.; Clarke, E.; Skolnick, M. S.; Wilson, L. R.

2018-05-01

We demonstrate electro-mechanical control of an on-chip GaAs optical beam splitter containing a quantum dot single-photon source. The beam splitter consists of two nanobeam waveguides, which form a directional coupler (DC). The splitting ratio of the DC is controlled by varying the out-of-plane separation of the two waveguides using electro-mechanical actuation. We reversibly tune the beam splitter between an initial state, with emission into both output arms, and a final state with photons emitted into a single output arm. The device represents a compact and scalable tuning approach for use in III-V semiconductor integrated quantum optical circuits.

Time-dependent chemo-electro-mechanical behavior of hydrogel-based structures

Science.gov (United States)

Leichsenring, Peter; Wallmersperger, Thomas

2018-03-01

Charged hydrogels are ionic polymer gels and belong to the class of smart materials. These gels are multiphasic materials which consist of a solid phase, a fluid phase and an ionic phase. Due to the presence of bound charges these materials are stimuli-responsive to electrical or chemical loads. The application of electrical or chemical stimuli as well as mechanical loads lead to a viscoelastic response. On the macroscopic scale, the response is governed by a local reversible release or absorption of water which, in turn, leads to a local decrease or increase of mass and a respective volume change. Furthermore, the chemo-electro-mechanical equilibrium of a hydrogel depends on the chemical composition of the gel and the surrounding solution bath. Due to the presence of bound charges in the hydrogel, this system can be understood as an osmotic cell where differences in the concentration of mobile ions in the gel and solution domain lead to an osmotic pressure difference. In the present work, a continuum-based numerical model is presented in order to describe the time-dependent swelling behavior of hydrogels. The numerical model is based on the Theory of Porous Media and captures the fluid-solid, fluid-ion and ion-ion interactions. As a direct consequence of the chemo-electro-mechanical equilibrium, the corresponding boundary conditions are defined following the equilibrium conditions. For the interaction of the hydrogel with surrounding mechanical structures, also respective jump condtions are formulated. Finaly, numerical results of the time-dependent behavior of a hydrogel-based chemo-sensor will be presented.

Electro-mechanical connection system for ITER in-vessel magnetic sensors

Energy Technology Data Exchange (ETDEWEB)

Rizzolo, Andrea; Brombin, Matteo; Gonzalez, Winder [Consorzio RFX, Corso Stati Uniti, 4, 35127 Padova (Italy); Marconato, Nicolò, E-mail: nicolo.marconato@igi.cnr.it [Consorzio RFX, Corso Stati Uniti, 4, 35127 Padova (Italy); Peruzzo, Simone [Consorzio RFX, Corso Stati Uniti, 4, 35127 Padova (Italy); Arshad, Shakeib [Fusion for Energy, C/Josep Pla, 2, 08019 Barcelona (Spain); Ma, Yunxing; Vayakis, George [ITER Organization, Route de Vinon-sur-Verdon, 13067 St Paul Lez Durance (France); Williams, Adrian [Oxford Technologies Ltd, 7 Nuffield Way, Abingdon, Oxon, OX14 1RL (United Kingdom)

2016-11-01

Highlights: • Latest status of the ITER “Generic In-Vessel Magnetic Platform” design activity. • Integration within the ITER In-Vessel configuration model. • Geometry optimization based on thermo-mechanical and magnetic field 3D calculation. • Assessment of the remote handling maintenance compatibility. - Abstract: This paper presents the preliminary design of the “In-Vessel Magnetic platform”, which is a subsystem of the magnetic diagnostics formed by all the components necessary for guaranteeing the thermo-mechanical interface of the actual magnetic sensors with the vacuum vessel (VV), their protection and the electrical connection to the in-vessel wiring for the transmission of the detected signal with a minimum level of noise. The design has been developed in order to comply with different functional requirements: the mechanical attachment to the VV; the electrical connection to the in-vessel wiring; efficient heat transfer to the VV; the compatibility with Remote Handling (RH) system for replacement; the integration of metrology features for post-installation control; the Electro Magnetic Interference (EMI) shielding from Electron Cyclotron Heating (ECH) stray radiation without compromising the sensor pass band (15 kHz). Significant effort has been dedicated to develop the CAD model, integrated within the ITER In-Vessel configuration model, taking care of the geometrical compliance with the Blanket modules (modified in order to accommodate the magnetic sensors in suitable grooves) and the RH compatibility. Thorough thermo-mechanical and electro-magnetic Finite Element Method (FEM) analyses have been performed to assess the reliability of the system in standard and off-normal operating conditions for the low frequency magnetic sensors.

Transport of magneto-nanoparticles during electro-osmotic flow in a micro-tube in the presence of magnetic field for drug delivery application

Science.gov (United States)

Mondal, A.; Shit, G. C.

2017-11-01

In this paper, we have examined the motion of magnetic-nanoparticles and the flow characteristics of biofluid in a micro-tube in the presence of externally applied magnetic field and electrokinetic effects. In the drug delivery system, the motion of the magnetic nanoparticles as carriers is important for therapeutic procedure in the treatment of tumor cells, infections and removing blood clots. The unidirectional electro-osmotic flow of biofluid is driven by the combined effects of pulsatile pressure gradient and electrokinetic force. The governing equation for unsteady electromagnetohydrodynamic flow subject to the no-slip boundary condition has been solved numerically by using Crank-Nicolson implicit finite difference scheme. We have analyzed the variation of axial velocity, velocity distribution of magnetic nanoparticles, volumetric flow rate and wall shear stress for various values of the non-dimensional parameters. The study reveals that blood flow velocity, carriers velocity and flow rate are strongly influenced by the electro-osmotic parameter as well as the Hartmann number. The particle mass parameter as well as the particle concentration parameter have efficient capturing effect on magnetic nanoparticles during blood flow through a micro-tube for drug delivery.

Electro-mechanical coupling of semiconductor film grown on stainless steel by oxidation

Science.gov (United States)

Lin, M. C.; Wang, G.; Guo, L. Q.; Qiao, L. J.; Volinsky, Alex A.

2013-09-01

Electro-mechanical coupling phenomenon in oxidation film on stainless steel has been discovered by using current-sensing atomic force microscopy, along with the I-V curves measurements. The oxidation films exhibit either ohmic, n-type, or p-type semiconductor properties, according to the obtained I-V curves. This technique allows characterizing oxidation films with high spatial resolution. Semiconductor properties of oxidation films must be considered as additional stress corrosion cracking mechanisms.

Characteristics and formation mechanism for stainless steel fiber with periodic micro-fins

Science.gov (United States)

Tang, Tao; Wan, Zhenping; Lu, Longsheng; Tang, Yong

2016-05-01

Metal fibers have been widely used in many industrial applications due to their unique advantages. In certain applications, such as catalyst supports or orthopedic implants, a rough surface or tiny outshoots on the surface of metal fibers to increase surface area are needed. However, it has not been concerned about the surface morphologies of metal fiber in the current research of metal fiber manufacturing. In this paper, a special multi-tooth tool composed of a row of triangular tiny teeth is designed. The entire cutting layer of multi-tooth tool bifurcates into several thin cutting layers due to tiny teeth involved in cutting. As a result, several stainless steel fibers with periodic micro-fins are produced simultaneously. Morphology of periodic micro-fins is found to be diverse and can be classified into three categories: unilateral plane, unilateral tapering and bilateral. There are two forming mechanisms for the micro-fins. One is that periodic burrs remained on the free side of cutting layer of a tiny tooth create micro-fins of stainless steel fiber produced by the next neighboring tiny tooth; the other is that the connections between two fibers stuck together come to be micro-fins if the two fibers are finally detached. Influence of cutting conditions on formation of micro-fins is investigated. Experimental results show that cutting depth has no significant effect on micro-fin formation, high cutting speed is conducive to micro-fin formation, and feed should be between 0.12 mm/r and 0.2 mm/r to reliably obtain stainless steel fiber with micro-fins. This research presents a new pattern of stainless steel fiber characterized by periodic micro-fins formed on the edge of fiber and its manufacturing method.

Mechanisms of fatigue in LIGA Ni MEMS thin films

International Nuclear Information System (INIS)

Yang, Y.; Imasogie, B.I.; Allameh, S.M.; Boyce, B.; Lian, K.; Lou, J.; Soboyejo, W.O.

2007-01-01

This paper presents the results of an experimental study of the mechanisms of fatigue in LIGA Ni micro-electro-mechanical systems (MEMS) thin films with micro-scale columnar and nano-scale equiaxed grains. Stress-life behavior is reported for films with thicknesses of 70 and 270 μm. The stress-life data are compared with previously reported data for Ni MEMS films and bulk Ni. The films with the nano-scale grains (15 nm average grain size) are shown to have higher strength and fatigue resistance (stress-life data) than those with columnar grain structures. The thicker films (with a columnar microstructure) are also shown to have comparable fatigue life to annealed Ni, while the thinner films (with a columnar microstructure) have comparable fatigue life to wrought Ni. The underlying mechanisms of crack nucleation and growth are elucidated via scanning and transmission electron microscopy. These reveal the formation of slip bands and surface oxides and crystallographic surface/sub-surface crack nucleation and growth in the films with the columnar structures. Surface and corner crack nucleations (from pre-existing defects) are observed in the nanostructured films. The implications of the results are discussed for the analyses of fatigue in nickel MEMS structures

Excimer laser micromachining for 3D microstructure

NARCIS (Netherlands)

Choi, Kyung Hyun; Meijer, J.; Masuzawa, Takahisa; Kim, Dae-Hyun

2004-01-01

A new 3D micromachining method, called Hole Area Modulation (HAM), has been introduced to enhance the current micromachining technology. In this method, information on the machining depth is converted to the sizes of holes on the mask. The machining is carried out with a simple 2D movement of the

Impact of Isolation and Immobilization Layers on the Electro-Mechanical Response of Piezoresistive Nano Cantilever Sensors.

Science.gov (United States)

Mathew, Ribu; Sankar, A Ravi

2018-03-01

the immobilization layer thickness and non-uniform surface stress loading on the electro-mechanical response of the sensor. Results and inferences obtained from this study will help NEMS engineers to optimize the performance of piezoresistive nano cantilever sensors and to design multi-layer cantilever platform structures for other transducers.

Micro-Mechanical Voltage Tunable Fabry-Perot Filters Formed in (111) Silicon. Degree awarded by Colorado Univ., Boulder, CO

Science.gov (United States)

Patterson, James D.

1997-01-01

The MEMS (Micro-Electro-Mechanical-Systems) technology is quickly evolving as a viable means to combine micro-mechanical and micro-optical elements on the same chip. One MEMS technology that has recently gained attention by the research community is the micro-mechanical Fabry-Perot optical filter. A MEMS based Fabry-Perot consists of a vertically integrated structure composed of two mirrors separated by an air gap. Wavelength tuning is achieved by applying a bias between the two mirrors resulting in an attractive electrostatic force which pulls the mirrors closer. In this work, we present a new micro-mechanical Fabry-Perot structure which is simple to fabricate and is integratable with low cost silicon photodetectors and transistors. The structure consists of a movable gold coated oxide cantilever for the top mirror and a stationary Au/Ni plated silicon bottom mirror. The fabrication process is single mask level, self aligned, and requires only one grown or deposited layer. Undercutting of the oxide cantilever is carried out by a combination of RIE and anisotropic KOH etching of the (111) silicon substrate. Metallization of the mirrors is provided by thermal evaporation and electroplating. The optical and electrical characteristics of the fabricated devices were studied and show promissing results. A wavelength shift of 120nm with 53V applied bias was demonstrated by one device geometry using 6.27 micrometer air gap. The finesse of the structure was 2.4. Modulation bandwidths ranging from 91KHz to greater than 920KHz were also observed. Theoretical calculations show that if mirror reflectivity, smoothness, and parallelism are improved, a finesse of 30 is attainable. The predictions also suggest that a reduction of the air gap to 1 micrometer results in an increased wavelength tuning range of 175 nm with a CMOS compatible 4.75V.

Structural coloration of metallic surfaces with micro/nano-structures induced by elliptical vibration texturing

Science.gov (United States)

Yang, Yang; Pan, Yayue; Guo, Ping

2017-04-01

Creating orderly periodic micro/nano-structures on metallic surfaces, or structural coloration, for control of surface apparent color and optical reflectivity has been an exciting research topic over the years. The direct applications of structural coloration include color marking, display devices, and invisibility cloak. This paper presents an efficient method to colorize metallic surfaces with periodic micro/nano-gratings using elliptical vibration texturing. When the tool vibration is coupled with a constant cutting velocity, controlled periodic ripples can be generated due to the overlapping tool trajectory. These periodic ripples with a wavelength near visible spectrum can act as micro-gratings to introduce iridescent colors. The proposed technique also provides a flexible method for color marking of metallic surfaces with arbitrary patterns and images by precise control of the spacing distance and orientation of induced micro/nano-ripples. Theoretical analysis and experimental results are given to demonstrate structural coloration of metals by a direct mechanical machining technique.

Thermal engineering and micro-technology; Thermique et microtechnologie

Energy Technology Data Exchange (ETDEWEB)

Kandlikar, S. [Rochester Inst. of Tech., NY (United States); Luo, L. [Institut National Polytechnique, 54 - Nancy (France); Gruss, A. [CEA Grenoble, GRETH, 38 (France); Wautelet, M. [Mons Univ. (Belgium); Gidon, S. [CEA Grenoble, Lab. d' Electronique et de Technologie de l' Informatique (LETI), 38 (France); Gillot, C. [Ecole Nationale Superieure d' Ingenieurs Electriciens de Grenoble, 38 - Saint Martin d' Heres (France)]|[CEA Grenoble, Lab. Electronique et de Technologie de l' Informatique (LETI), 38 (France); Therme, J.; Marvillet, Ch.; Vidil, R. [CEA Grenoble, 38 (France); Dutartre, D. [ST Microelectronique, France (France); Lefebvre, Ph. [SNECMA, 75 - Paris (France); Lallemand, M. [Institut National des Sciences Appliquees (INSA), 69 - Villeurbanne (France); Colin, S. [Institut National des Sciences Appliquees (INSA), 31 - Toulouse (France); Joulin, K. [Ecole Nationale Superieure de Mecanique et d' Aerotechnique (ENSMA), 86 - Poitiers (France); Gad el Hak, M. [Virginia Univ., Charlottesville, VA (United States)

2003-07-01

This document gathers the abstracts and transparencies of 5 invited conferences of this congress of the SFT about heat transfers and micro-technologies: Flow boiling in microchannels: non-dimensional groups and heat transfer mechanisms (S. Kandlikar); Intensification and multi-scale process units (L. Luo and A. Gruss); Macro-, micro- and nano-systems: different physics? (M. Wautelet); micro-heat pipes (M. Lallemand); liquid and gas flows inside micro-ducts (S. Colin). The abstracts of the following presentations are also included: Electro-thermal writing of nano-scale memory points in a phase change material (S. Gidon); micro-technologies for cooling in micro-electronics (C. Gillot); the Minatec project (J. Therme); importance and trends of thermal engineering in micro-electronics (D. Dutartre); Radiant heat transfers at short length scales (K. Joulain); Momentum and heat transfer in micro-electromechanical systems (M. Gad-el-Hak). (J.S.)

Fabrication of a Flexible Micro CO Sensor for Micro Reformer Applications

Directory of Open Access Journals (Sweden)

Yi-Man Lo

2010-11-01

Full Text Available Integration of a reformer and a proton exchange membrane fuel cell (PEMFC is problematic due to the presence in the gas from the reforming process of a slight amount of carbon monoxide. Carbon monoxide poisons the catalyst of the proton exchange membrane fuel cell subsequently degrading the fuel cell performance, and necessitating the sublimation of the reaction gas before supplying to fuel cells. Based on the use of micro-electro-mechanical systems (MEMS technology to manufacture flexible micro CO sensors, this study elucidates the relation between a micro CO sensor and different SnO2 thin film thicknesses. Experimental results indicate that the sensitivity increases at temperatures ranging from 100–300 °C. Additionally, the best sensitivity is obtained at a specific temperature. For instance, the best sensitivity of SnO2 thin film thickness of 100 nm at 300 °C is 59.3%. Moreover, a flexible micro CO sensor is embedded into a micro reformer to determine the CO concentration in each part of a micro reformer in the future, demonstrating the inner reaction of a micro reformer in depth and immediate detection.

Development of a Multi-User Polyimide-MEMS Fabrication Process and its Application to MicroHotplates

KAUST Repository

Lizardo, Ernesto B.

2013-01-01

Micro-electro-mechanical systems (MEMS) became possible thanks to the silicon based technology used to fabricate integrated circuits. Originally, MEMS fabrication was limited to silicon based techniques and materials, but the expansion of MEMS

Medically relevant ElectroNeedle technology development.

Energy Technology Data Exchange (ETDEWEB)

Schmidt, Carrie Frances; Thomas, Michael Loren; McClain, Jaime L.; Harper, Jason C.; Achyuthan, Komandoor E.; Ten Eyck, Gregory A.

2008-11-01

ElectroNeedles technology was developed as part of an earlier Grand Challenge effort on Bio-Micro Fuel Cell project. During this earlier work, the fabrication of the ElectroNeedles was accomplished along with proof-of-concept work on several electrochemically active analytes such as glucose, quinone and ferricyanide. Additionally, earlier work demonstrated technology potential in the field of immunosensors by specifically detecting Troponin, a cardiac biomarker. The current work focused upon fabrication process reproducibility of the ElectroNeedles and then using the devices to sensitively detect p-cresol, a biomarker for kidney failure or nephrotoxicity. Valuable lessons were learned regarding fabrication assurance and quality. The detection of p-cresol was accomplished by electrochemistry as well as using fluorescence to benchmark ElectroNeedles performance. Results from these studies will serve as a guide for the future fabrication processes involving ElectroNeedles as well as provide the groundwork necessary to expand technology applications. One paper has been accepted for publication acknowledging LDRD funding (K. E. Achyuthan et al, Comb. Chem. & HTS, 2008). We are exploring the scope for a second paper describing the applications potential of this technology.

Auction Mechanism of Micro-Grid Project Transfer

Directory of Open Access Journals (Sweden)

Yong Long

2017-10-01

Full Text Available Micro-grid project transfer is the primary issue of micro-grid development. The efficiency and quality of the micro-grid project transfer directly affect the quality of micro-grid project construction and development, which is very important for the sustainable development of micro-grid. This paper constructs a multi-attribute auction model of micro-grid project transfer, which reflects the characteristics of micro-grid system and the interests of stakeholders, calculates the optimal bidding strategy and analyzes the influence of relevant factors on auction equilibrium by multi-stage dynamic game with complete information, and makes a numerical simulation analysis. Results indicate that the optimal strategy of auction mechanism is positively related to power quality, energy storage quality, and carbon emissions. Different from the previous lowest price winning mechanism, the auction mechanism formed in this paper emphasizes that the energy suppliers which provide the comprehensive optimization of power quality, energy storage quality, carbon emissions, and price will win the auction, when both the project owners and energy suppliers maximize their benefits under this auction mechanism. The auction mechanism is effective because it is in line with the principle of individual rationality and incentive compatibility. In addition, the number of energy suppliers participating in the auction and the cost of the previous auction are positively related to the auction equilibrium, both of which are adjusting the equilibrium results of the auction. At the same time, the utilization rate of renewable energy and the comprehensive utilization of energy also have a positive impact on the auction equilibrium. In the end, this paper puts forward a series of policy suggestions about micro-grid project auction. The research in this paper is of great significance to improve the auction quality of micro-grid projects and promote the sustainable development of micro-grid.

The deformable secondary mirror of VLT: final electro-mechanical and optical acceptance test results

Science.gov (United States)

Briguglio, Runa; Biasi, Roberto; Xompero, Marco; Riccardi, Armando; Andrighettoni, Mario; Pescoller, Dietrich; Angerer, Gerald; Gallieni, Daniele; Vernet, Elise; Kolb, Johann; Arsenault, Robin; Madec, Pierre-Yves

2014-07-01

The Deformable Secondary Mirror (DSM) for the VLT ended the stand-alone electro-mechanical and optical acceptance process, entering the test phase as part of the Adaptive Optics Facility (AOF) at the ESO Headquarter (Garching). The VLT-DSM currently represents the most advanced already-built large-format deformable mirror with its 1170 voice-coil actuators and its internal metrology based on co-located capacitive sensors to control the shape of the 1.12m-diameter 2mm-thick convex shell. The present paper reports the final results of the electro-mechanical and optical characterization of the DSM executed in a collaborative effort by the DSM manufacturing companies (Microgate s.r.l. and A.D.S. International s.r.l.), INAF-Osservatorio Astrofisico di Arcetri and ESO. The electro-mechanical acceptance tests have been performed in the company premises and their main purpose was the dynamical characterization of the internal control loop response and the calibration of the system data that are needed for its optimization. The optical acceptance tests have been performed at ESO (Garching) using the ASSIST optical test facility. The main purpose of the tests are the characterization of the optical shell flattening residuals, the corresponding calibration of flattening commands, the optical calibration of the capacitive sensors and the optical calibration of the mirror influence functions.

Numerical analysis of micro-/nanoscale gas-film lubrication of sliding surface with complicated structure

International Nuclear Information System (INIS)

Kawagoe, Yoshiaki; Isono, Susumu; Takeno, Takanori; Yonemura, Shigeru; Takagi, Toshiyuki; Miki, Hiroyuki

2014-01-01

It has been reported that the friction between a partially polished diamond-coated surface and a metal surface was drastically reduced to zero when they are slid at a few m/s. Since the sliding was noiseless, it seems that the diamond-coated surface was levitated over the counter surface and the sliding mechanism was the gas film lubrication. Recently, the mechanism of levitation of a slider with a micro/nanoscale surface structure on a rotating disk was theoretically clarified [S. Yonemura et al., Tribol. Lett., (2014), doi:10.1007/s11249-014-0368-2]. Probably, the partially polished diamond-coated surface may be levitated by high gas pressure generated by the micro/nanoscale surface structure on it. In this study, in order to verify our deduction, we performed numerical simulations of sliding of partially polished diamond-coated surface by reproducing its complicated surface structure using the data measured by an atomic force microscope (AFM). As a result, we obtained the lift force which is large enough to levitate the slider used in the experiment

Numerical analysis of micro-/nanoscale gas-film lubrication of sliding surface with complicated structure

Energy Technology Data Exchange (ETDEWEB)

Kawagoe, Yoshiaki; Isono, Susumu; Takeno, Takanori [Department of Nanomechanics, Graduate School of Engineering, Tohoku University, 6-6-01 Aoba, Aramaki, Aoba-ku, Sendai 980-8579 (Japan); Yonemura, Shigeru; Takagi, Toshiyuki [Institute of Fluid Science, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577 (Japan); Miki, Hiroyuki [Frontier Research Institute for Interdisciplinary Sciences, Tohoku University, 6-3 Aoba, Aramaki, Aoba-ku, Sendai 980-8578 (Japan)

2014-12-09

It has been reported that the friction between a partially polished diamond-coated surface and a metal surface was drastically reduced to zero when they are slid at a few m/s. Since the sliding was noiseless, it seems that the diamond-coated surface was levitated over the counter surface and the sliding mechanism was the gas film lubrication. Recently, the mechanism of levitation of a slider with a micro/nanoscale surface structure on a rotating disk was theoretically clarified [S. Yonemura et al., Tribol. Lett., (2014), doi:10.1007/s11249-014-0368-2]. Probably, the partially polished diamond-coated surface may be levitated by high gas pressure generated by the micro/nanoscale surface structure on it. In this study, in order to verify our deduction, we performed numerical simulations of sliding of partially polished diamond-coated surface by reproducing its complicated surface structure using the data measured by an atomic force microscope (AFM). As a result, we obtained the lift force which is large enough to levitate the slider used in the experiment.

Infra-red laser ablative micromachining of parylene-C on SiO2 substrates for rapid prototyping, high yield, human neuronal cell patterning

International Nuclear Information System (INIS)

Raos, B J; Unsworth, C P; Costa, J L; Rohde, C A; Simpson, M C; Doyle, C S; Dickinson, M E; Bunting, A S; Murray, A F; Delivopoulos, E; Graham, E S

2013-01-01

Cell patterning commonly employs photolithographic methods for the micro fabrication of structures on silicon chips. These require expensive photo-mask development and complex photolithographic processing. Laser based patterning of cells has been studied in vitro and laser ablation of polymers is an active area of research promising high aspect ratios. This paper disseminates how 800 nm femtosecond infrared (IR) laser radiation can be successfully used to perform laser ablative micromachining of parylene-C on SiO 2 substrates for the patterning of human hNT astrocytes (derived from the human teratocarcinoma cell line (hNT)) whilst 248 nm nanosecond ultra-violet laser radiation produces photo-oxidization of the parylene-C and destroys cell patterning. In this work, we report the laser ablation methods used and the ablation characteristics of parylene-C for IR pulse fluences. Results follow that support the validity of using IR laser ablative micromachining for patterning human hNT astrocytes cells. We disseminate the variation in yield of patterned hNT astrocytes on parylene-C with laser pulse spacing, pulse number, pulse fluence and parylene-C strip width. The findings demonstrate how laser ablative micromachining of parylene-C on SiO 2 substrates can offer an accessible alternative for rapid prototyping, high yield cell patterning with broad application to multi-electrode arrays, cellular micro-arrays and microfluidics. (paper)

Electro-solar cars are 200 times more efficient than those fuelled with corn

International Nuclear Information System (INIS)

Danielo, Olivier

2014-01-01

Whereas photosynthesis and photovoltaic are both means to collect solar energy, this article examines and discusses which of these both approaches is the most efficient for the automotive sector. It outlines that micro-algae and oil palm are far behind photovoltaic energy in terms of efficiency, i.e. produced power per surface unit. It indicates that some studies showed that a huge amount of surfaces would be needed to replace oil by agro-fuels. It evokes the issue of hydrogen storage for fuel cells, briefly presents the electro-solar Hyperloop project which is said to be the most ecological means of transportation

Micromachined Precision Inertial Instruments

National Research Council Canada - National Science Library

Najafi, Khalil

2003-01-01

This program focuses on developing inertial-grade micromachined accelerometers and gyroscopes and their associated electronics and packaging for use in a variety of military and commercial applications...

Asymmetric flows over symmetric surfaces: capacitive coupling in induced-charge electro-osmosis

Energy Technology Data Exchange (ETDEWEB)

Mansuripur, T S [Department of Physics, University of California, Santa Barbara, CA 93106 (United States); Pascall, A J; Squires, T M [Department of Chemical Engineering, University of California, Santa Barbara, CA 93106 (United States)], E-mail: squires@engineering.ucsb.edu

2009-07-15

We report curious asymmetric induced-charge electro-osmotic (ICEO) flows over a symmetric, planar gate electrode under applied ac electric fields, whereas symmetric, counter-rotating rolls are expected. Furthermore, the asymmetric component of the flow is consistently directed towards the grounded electrode. We propose that capacitive coupling of the gate electrode to the microscope stage-a comparatively large equipotential surface that acts effectively as a ground-is responsible for this symmetry breaking. This stray capacitance drives the formation of a double layer whose zeta potential is proportional to the potential drop from the electrolyte directly above the gate electrode to the external stage. Therefore, the charge in this 'stray' double layer varies in phase with the driving field, resulting in a rectified, steady flow as with standard ICEO. We experimentally vary the stray capacitance, the electric potential of the stage and the location of the gate electrode, and find that the effect on the stray flow is qualitatively consistent with the predictions of the proposed mechanism. In the process, we demonstrate that capacitive coupling offers an additional means of manipulating fluid flow over a polarizable surface.

Asymmetric flows over symmetric surfaces: capacitive coupling in induced-charge electro-osmosis

International Nuclear Information System (INIS)

Mansuripur, T S; Pascall, A J; Squires, T M

2009-01-01

We report curious asymmetric induced-charge electro-osmotic (ICEO) flows over a symmetric, planar gate electrode under applied ac electric fields, whereas symmetric, counter-rotating rolls are expected. Furthermore, the asymmetric component of the flow is consistently directed towards the grounded electrode. We propose that capacitive coupling of the gate electrode to the microscope stage-a comparatively large equipotential surface that acts effectively as a ground-is responsible for this symmetry breaking. This stray capacitance drives the formation of a double layer whose zeta potential is proportional to the potential drop from the electrolyte directly above the gate electrode to the external stage. Therefore, the charge in this 'stray' double layer varies in phase with the driving field, resulting in a rectified, steady flow as with standard ICEO. We experimentally vary the stray capacitance, the electric potential of the stage and the location of the gate electrode, and find that the effect on the stray flow is qualitatively consistent with the predictions of the proposed mechanism. In the process, we demonstrate that capacitive coupling offers an additional means of manipulating fluid flow over a polarizable surface.

Comprehensive nonlocal analysis of piezoelectric nanobeams with surface effects in bending, buckling and vibrations under magneto-electro-thermo-mechanical loading

Science.gov (United States)

Ebrahimi-Nejad, Salman; Boreiry, Mahya

2018-03-01

The bending, buckling and vibrational behavior of size-dependent piezoelectric nanobeams under thermo-magneto-mechano-electrical environment are investigated by performing a parametric study, in the presence of surface effects. The Gurtin-Murdoch surface elasticity and Eringen’s nonlocal elasticity theories are applied in the framework of Euler–Bernoulli beam theory to obtain a new non-classical size-dependent beam model for dynamic and static analyses of piezoelectric nanobeams. In order to satisfy the surface equilibrium equations, cubic variation of stress with beam thickness is assumed for the bulk stress component which is neglected in classical beam models. Results are obtained for clamped - simply-supported (C-S) and simply-supported - simply-supported (S-S) boundary conditions using a proposed analytical solution method. Numerical examples are presented to demonstrate the effects of length, surface effects, nonlocal parameter and environmental changes (temperature, magnetic field and external voltage) on deflection, critical buckling load and natural frequency for each boundary condition. Results of this study can serve as benchmarks for the design and analysis of nanostructures of magneto-electro-thermo-elastic materials.

Anisotropic wetting properties on a precision-ground micro-V-grooved Si surface related to their micro-characterized variables

International Nuclear Information System (INIS)

Li, P; Xie, J; Cheng, J; Wu, K K

2014-01-01

Micro-characterized variables are proposed to precisely characterize a micro-V-grooved Si surface through the 3D measured topography rather than the designed one. In this study, level and gradient micro-grooved surfaces with depth of 25–80 µm were precisely and smoothly fabricated using a new micro-grinding process rather than laser machining and chemical etching. The objective is to investigate how these accurate micro-characterized variables systematically influence anisotropic wetting and droplet self-movement on such regular micro-structured surfaces without surface chemical modification. First, the anisotropic wetting, droplet sliding, pinning effect and droplet impact were experimentally investigated; then, theoretical anisotropic wetting models were constructed to predict and design the anisotropic wetting. The experiments show that the level micro-V-grooved surface produces the anisotropic wetting and pinning effects. It not only approximates superhydrophobicity but also produces high surface free energy. Moreover, the gradient micro-V-grooved surface with large pitch may lead to much easier droplet sliding than the level one along the micro-groove. The droplet self-movement trend increases with increasing the micro-groove gradient and micro-V-groove ratio. The micro-groove pitch and depth also influence the droplet impact. Theoretical analyses show that the wetting anisotropy and the droplet anisotropy both reach their largest value and disappear for a sharp micro-groove top when the micro-V-groove ratio is equal to 0.70 and 2.58, respectively, which may change the wetting between the composite state and the non-composite state. It is confirmed that the wetting behavior may be designed and predicted by the accurate micro-characterized variables of a regular micro-structured surface. (paper)

Anisotropic wetting properties on a precision-ground micro-V-grooved Si surface related to their micro-characterized variables

Science.gov (United States)

Li, P.; Xie, J.; Cheng, J.; Wu, K. K.

2014-07-01

Micro-characterized variables are proposed to precisely characterize a micro-V-grooved Si surface through the 3D measured topography rather than the designed one. In this study, level and gradient micro-grooved surfaces with depth of 25-80 µm were precisely and smoothly fabricated using a new micro-grinding process rather than laser machining and chemical etching. The objective is to investigate how these accurate micro-characterized variables systematically influence anisotropic wetting and droplet self-movement on such regular micro-structured surfaces without surface chemical modification. First, the anisotropic wetting, droplet sliding, pinning effect and droplet impact were experimentally investigated; then, theoretical anisotropic wetting models were constructed to predict and design the anisotropic wetting. The experiments show that the level micro-V-grooved surface produces the anisotropic wetting and pinning effects. It not only approximates superhydrophobicity but also produces high surface free energy. Moreover, the gradient micro-V-grooved surface with large pitch may lead to much easier droplet sliding than the level one along the micro-groove. The droplet self-movement trend increases with increasing the micro-groove gradient and micro-V-groove ratio. The micro-groove pitch and depth also influence the droplet impact. Theoretical analyses show that the wetting anisotropy and the droplet anisotropy both reach their largest value and disappear for a sharp micro-groove top when the micro-V-groove ratio is equal to 0.70 and 2.58, respectively, which may change the wetting between the composite state and the non-composite state. It is confirmed that the wetting behavior may be designed and predicted by the accurate micro-characterized variables of a regular micro-structured surface.

Multi-Parameter Analysis of Surface Finish in Electro-Discharge Machining of Tool Steels

Directory of Open Access Journals (Sweden)

Cornelia Victoria Anghel

2006-10-01

Full Text Available The paper presents a multi- parameter analysis of surface finish imparted to tool-steel plates by electro-discharge machining (EDM is presented. The interrelationship between surface texture parameters and process parameters is emphasized. An increased number of parameters is studied including amplitude, spacing, hybrid and fractal parameters,, as well. The correlation of these parameters with the machining conditions is investigated. Observed characteristics become more pronounced, when intensifying machining conditions. Close correlation exists between certain surface finish parameters and EDM input variables and single and multiple statistical regression models are developed.

Meissner-levitated micro-systems

Energy Technology Data Exchange (ETDEWEB)

Coombs, T A; Samad, I; Hong, Z; Eves, D; Rastogi, A [Cambridge University Engineering Department, Trumpington Street, Cambridge, CB2 PZ (United Kingdom)

2006-06-01

Advanced silicon processing techniques developed for the Very Large Scale Integration (VLSI) industry have been exploited in recent years to enable the production of micro-fabricated moving mechanical systems known as Micro Electro Mechanical Systems (MEMS). These devices offer advantages in terms of cost, scalability and robustness over their preceding equivalents. Cambridge University have worked for many years on the investigation of high temperature superconductors (HTS) in flywheel energy storage applications. This experience is now being used to research into superconducting Micro-Bearings for MEMS, whereby circular permanent magnet arrays are levitated and spun above a superconductor to produce bearings suitable for motors and other micron scale devices. The novelty in the device lies in the fact that the rotor is levitated into position by Meissner flux exclusion, whilst stability is provided by flux pinned within the body of the superconductor. This work includes: the investigation of the properties of various magnetic materials, their fabrication processes and their suitability for MEMS; finite element analysis to analyse the interaction between the magnetic materials and YBCO to determine the stiffness and height of levitation. Finally a micro-motor with the above principles is currently being fabricated within the group.

Research on the effect of coverage rate on the surface quality in laser direct writing process

Science.gov (United States)

Pan, Xuetao; Tu, Dawei

2017-07-01

Direct writing technique is usually used in femtosecond laser two-photon micromachining. The size of the scanning step is an important factor affecting the surface quality and machining efficiency of micro devices. According to the mechanism of two-photon polymerization, combining the distribution function of light intensity and the free radical concentration theory, we establish the mathematical model of coverage of solidification unit, then analyze the effect of coverage on the machining quality and efficiency. Using the principle of exposure equivalence, we also obtained the analytic expressions of the relationship among the surface quality characteristic parameters of microdevices and the scanning step, and carried out the numerical simulation and experiment. The results show that the scanning step has little influence on the surface quality of the line when it is much smaller than the size of the solidification unit. However, with increasing scanning step, the smoothness of line surface is reduced rapidly, and the surface quality becomes much worse.

Short-pulse-width micromachining of hard materials using DPSS Nd:YAG lasers

Science.gov (United States)

Heglin, Michael; Govorkov, Sergei V.; Scaggs, Michael J.; Theoharidis, Haris; Schoelzel, T.

2002-06-01

The material processing of an industrial, short-pulse duration DPPS YAG laser producing peak powers greater than 0.2MW is discussed in this paper. This peak power provides sufficient materials processing capability to meet the micro machining needs in the automotive, semiconductor, micro- electronic, medical and telecommunication industries. All hard and soft materials including: plastics, metals, ceramics, diamond and other crystalline materials are suitable candidates for the processing capability of this laser. Micro level features can be machined in these materials to a depth in excess of 1mm with high quality results. In most applications feature sizes can be achieved that are not possible or economical with existing technologies. The optical beam delivery system requirements, and overall micro-machining set-up are also described. The drilling and cutting versatility down to feature sizes of less than 7 micrometers , as well as, complex shapes are shown. The wavelength, pulse length, and peakpower are described and relate to their effect on recast, micro-cracking and material removal rates. Material removal effects related to progressive penetration into the material will be reviewed. The requirements of this DPSS laser technology to meet the operational requirements for high duty cycle operation in industrial environments is covered along with processing flexibility and lower operating cost.

Technical report on micro-mechanical versus conventional modelling in non-linear fracture mechanics

International Nuclear Information System (INIS)

2001-07-01

While conventional fracture mechanics is capable of predicting crack growth behaviour if sufficient experimental observations are available, micro-mechanical modelling can both increase the accuracy of these predictions and model phenomena that are inaccessible by the conventional theory such as the ductile-cleavage temperature transition. A common argument against micro-mechanical modelling is that it is too complicated for use in routine engineering applications. This is both a computational and an educational problem. That micro-mechanical modelling is unnecessarily complicated is certainly true in many situations. The on-going development of micro-mechanical models, computational algorithms and computer speed will however most probably diminish the computational problem rather rapidly. Compare for instance the rate of development of computational methods for structural analysis. Meanwhile micro-mechanical modelling may serve as a tool by which more simplified engineering methods can be validated. The process of receiving a wide acceptance of the new methods is probably much slower. This involves many steps. First the research community must be in reasonable agreement on the methods and their use. Then the methods have to be implemented into computer software and into code procedures. The development and acceptance of conventional fracture mechanics may serve as an historical example of the time required before a new methodology has received a wide usage. The CSNI Working Group on Integrity and Ageing (IAGE) decided to carry out a report on micro-mechanical modeling to promote this promising and valuable technique. The report presents a comparison with non-linear fracture mechanics and highlights key aspects that could lead to a better knowledge and accurate predictions. Content: - 1. Introduction; - 2. Concepts of non-linear fracture mechanics with point crack tip modelling; - 3. Micro-mechanical models for cleavage fracture; - 4, Micro-mechanical modelling of

A few nascent methods for measuring mechanical properties of the biological cell.

Energy Technology Data Exchange (ETDEWEB)

Thayer, Gayle Echo; de Boer, Maarten Pieter; Corvalan, Carlos (Purdue University, West Lafayette, IN); Corwin, Alex David; Campanella, Osvaldo H. (Purdue University, West Lafayette, IN); Nivens, David (Purdue University, West Lafayette, IN); Werely, Steven (Purdue University, West Lafayette, IN); Sumali, Anton Hartono; Koch, Steven John

2006-01-01

This report summarizes a survey of several new methods for obtaining mechanical and rheological properties of single biological cells, in particular: (1) The use of laser Doppler vibrometry (LDV) to measure the natural vibrations of certain cells. (2) The development of a novel micro-electro-mechanical system (MEMS) for obtaining high-resolution force-displacement curves. (3) The use of the atomic force microscope (AFM) for cell imaging. (4) The adaptation of a novel squeezing-flow technique to micro-scale measurement. The LDV technique was used to investigate the recent finding reported by others that the membranes of certain biological cells vibrate naturally, and that the vibration can be detected clearly with recent instrumentation. The LDV has been reported to detect motions of certain biological cells indirectly through the motion of a probe. In this project, trials on Saccharomyces cerevisiae tested and rejected the hypothesis that the LDV could measure vibrations of the cell membranes directly. The MEMS investigated in the second technique is a polysilicon surface-micromachined force sensor that is able to measure forces to a few pN in both air and water. The simple device consists of compliant springs with force constants as low as 0.3 milliN/m and Moire patterns for nanometer-scale optical displacement measurement. Fields from an electromagnet created forces on magnetic micro beads glued to the force sensors. These forces were measured and agreed well with finite element prediction. It was demonstrated that the force sensor was fully functional when immersed in aqueous buffer. These results show the force sensors can be useful for calibrating magnetic forces on magnetic beads and also for direct measurement of biophysical forces on-chip. The use of atomic force microscopy (AFM) for profiling the geometry of red blood cells was the third technique investigated here. An important finding was that the method commonly used for attaching the cells to a

Application of Electro Chemical Machining for materials used in extreme conditions

Science.gov (United States)

Pandilov, Z.

2018-03-01

Electro-Chemical Machining (ECM) is the generic term for a variety of electrochemical processes. ECM is used to machine work pieces from metal and metal alloys irrespective of their hardness, strength or thermal properties, through the anodic dissolution, in aerospace, automotive, construction, medical equipment, micro-systems and power supply industries. The Electro Chemical Machining is extremely suitable for machining of materials used in extreme conditions. General overview of the Electro-Chemical Machining and its application for different materials used in extreme conditions is presented.

Numerical Simulation of Electro-Mechanical Impedance Response in Cable-Anchor Connection Interface

International Nuclear Information System (INIS)

Nguyen, Khac Duy; Kim, Jeong Tae

2011-01-01

In this study, a finite element(FE) analysis on electro-mechanical impedance response of cable-anchor connection interface under various anchor force is presented. In order to achieve the objective, the following approaches are implemented. Firstly, an interface washer coupled with piezoelectric(PZT) material is designed for monitoring cable-force loss. The interface washer is a small aluminum plate on which a PZT patch is surface-bonded. Cable-force loss could be monitored by installing the interface washer between the anchor plate and the anchorage of cable-anchor connection and examining the changes of impedance of the interface washer. Secondly, a FE model for cable-anchor connection is established to examine the effect of cable-force on impedance response of interface washer. Also, the effects of geometrical and material properties of the interface washer on impedance responses under various cable-forces are investigated. Finally, validation of the FE analysis is experimentally evaluated by a lab-scale cable-anchor connection

Challenges in high accuracy surface replication for micro optics and micro fluidics manufacture

DEFF Research Database (Denmark)

Tosello, Guido; Hansen, Hans Nørgaard; Calaon, Matteo

2014-01-01

Patterning the surface of polymer components with microstructured geometries is employed in optical and microfluidic applications. Mass fabrication of polymer micro structured products is enabled by replication technologies such as injection moulding. Micro structured tools are also produced...... by replication technologies such as nickel electroplating. All replication steps are enabled by a high precision master and high reproduction fidelity to ensure that the functionalities associated with the design are transferred to the final component. Engineered surface micro structures can be either...

Micro creep mechanisms of tungsten

International Nuclear Information System (INIS)

Levoy, R.; Hugon, I.; Burlet, H.; Baillin, X.; Guetaz, L.

2000-01-01

Due to its high melting point (3410 deg C), tungsten offers good mechanical properties at elevated temperatures for several applications in non-oxidizing environment. The creep behavior of tungsten is well known between 1200 and 2500 deg C and 10 -3 to 10 -1 strain. However, in some applications when dimensional stability of components is required, these strains are excessive and it is necessary to know the creep behavior of the material for micro-strains (between 10 -4 and 10 -6 ). Methods and devices used to measure creep micro-strains are presented, and creep equations (Norton and Chaboche laws) were developed for wrought, annealed and recrystallized tungsten. The main results obtained on tungsten under low stresses are: stress exponent 1, symmetry of micro-strains in creep-tension and creep-compression, inverse creep (threshold stress), etc. TEM, SEM and EBSD studies allow interpretation of the micro-creep mechanism of tungsten under low stresses and low temperature (∼0.3 K) like the Harper-Dorn creep. In Harper-Dorn creep, micro-strains are associated with the density and the distribution of dislocations existing in the crystals before creep. At 975 deg C, the initial dislocation structure moves differently whether or not a stress is applied. To improve the micro-creep behavior of tungsten, a heat treatment is proposed to create the optimum dislocation structure. (authors)

Micro-fabrication technology for piezoelectric film formation and its application to MEMS

OpenAIRE

一木, 正聡; 曹, 俊杰; 張, 麓〓; 王, 占杰; 前田, 龍太郎; Masaaki, ICHIKI; Jiunn Jye, TSAUR; Lulu, ZHANG; Zhang Jie, WANG; Ryutaro, MAEDA; 産業技術総合研究所; 産業技術総合研究所; 産業技術総合研究所; 東北大学; 産業技術総合研究所

2005-01-01

Technological problems for realization of Micro Electro-mechanical System (MEMS) are discussed and an introduction of smart materials (PZT) is encouraged. The film formation and micromaching technology are discussed in integration of PZT thin films into MEMS. Further developments are proposed on PZT micro sensors and actuators with special emphasis laid on exploration of new application fields of MEMS, such as scanning mirror. Internal stress is estimated and analyzed for the improvement of d...

Manufacturing of a micro-tungsten carbide electrode using a supersonic-aided electrolysis process

International Nuclear Information System (INIS)

Weng, Feng-Tsai; Ho, Chi-Ting

2008-01-01

In this study, a novel micromachining technology for fabricating micro parts was described. The original diameter of a tungsten carbide rod was 3 mm, and it was first processed to a rod with a diameter of 50 µm by a precision-grinding process. It could then be machined to the desired diameter by a supersonic-aided electrolysis process. A high-aspect ratio of the micro-tungsten carbide rod was easily obtained by this process. The surface roughness of the sample that was processed by electrolysis with supersonic-aided agitation was compared with that of the sample obtained without agitation. The machined surface of the sample was smooth, and the reason may be that ionized particles in the anode could be removed by supersonic-aided agitation during the electrolysis process. A microelectrode with a tip of approximately 1 µm could be obtained by this process. (technical note)

Effects of surface roughening on the mass transport and mechanical properties of ionic polymer-metal composite

Science.gov (United States)

Chang, Longfei; Asaka, Kinji; Zhu, Zicai; Wang, Yanjie; Chen, Hualing; Li, Dichen

2014-06-01

Ionic Polymer-Metal Composite (IPMC) has been well-documented of being a promising functional material in extensive applications. In its most popular and traditional manufacturing technique, roughening is a key process to ensure a satisfying performance. In this paper, based on a lately established multi-physical model, the effect of roughening process on the inner mass transportation and the electro-active output of IPMC were investigated. In the model, the electro-chemical field was monitored by Poisson equation and a properly simplified Nernst-Planck equation set, while the mechanical field was evaluated on the basis of volume strain effect. Furthermore, with Ramo-Shockley theorem, the out-circuit current and accumulated charge on the electrode were bridged with the inner cation distribution. Besides, nominal current and charge density as well as the curvature of the deformation were evaluated to characterize the performance of IPMC. The simulation was implemented by Finite Element Method with Comsol Multi-physics, based on two groups of geometrical models, those with various rough interface and those with different thickness. The results of how the roughening impact influences on the performance of IPMC were discussed progressively in three aspects, steady-state distribution of local potential and mass concentration, current response and charge accumulation, as well as the curvature of deformation. Detailed explanations for the performance improvement resulted from surface roughening were provided from the micro-distribution point of view, which can be further explored for the process optimization of IPMC.

Non-traditional micromachining processes fundamentals and applications

CERN Document Server

Bhattacharyya, B; Davim, J

2017-01-01

This book presents a complete coverage of micromachining processes from their basic material removal phenomena to past and recent research carried by a number of researchers worldwide. Chapters on effective utilization of material resources, improved efficiency, reliability, durability, and cost effectiveness of the products are presented. This book provides the reader with new and recent developments in the field of micromachining and microfabrication of engineering materials.

Durable and mass producible polymer surface structures with different combinations of micro–micro hierarchy

International Nuclear Information System (INIS)

Jiang, Yu; Suvanto, Mika; Pakkanen, Tapani A

2016-01-01

Extensive studies have been performed with the aim of fabricating hierarchical surface structures inspired by nature. However, synthetic hierarchical structures have to sacrifice mechanical resistance to functionality by introducing finer scaled structures. Therefore, surfaces are less durable. Surface micro–micro hierarchy has been proven to be effective in replacing micro–nano hierarchy in the sense of superhydrophobicity. However, less attention has been paid to the combined micro–micro hierarchies with surface pillars and pits incorporated together. The fabrication of this type of hierarchy may be less straightforward, with the possibility of being a complicated multi-step process. In this study, we present a simple yet mass producible fabrication method for hierarchical structures with different combinations of surface pillars and pits. The fabrication was based on only one aluminum (Al) mold with sequential mountings. The fabricated structures exhibit high mechanical durability and structural stabilities with a normal load up to 100 kg. In addition, the theoretical estimation of the wetting state shows a promising way of stabilizing a water droplet on the surface pit structures with a more stable Cassie–Baxter state. (paper)

Resist materials for proton micromachining

International Nuclear Information System (INIS)

Kan, J.A. van; Sanchez, J.L.; Xu, B.; Osipowicz, T.; Watt, F.

1999-01-01

The production of high aspect ratio microstructures is a potential growth area. The combination of deep X-ray lithography with electroforming and micromolding (i.e. LIGA) is one of the main techniques used to produce 3D microstructures. The new technique of proton micromachining employs focused MeV protons in a direct write process which is complementary to LIGA, e.g. micromachining with 2 MeV protons results in microstructures with a height of 63 μm and lateral sub-micrometer resolution in PMMA resist. The aim of this paper is to investigate the capabilities of proton micromachining as a lithographic technique. This involves the study of different types of resists. The dose distribution of high molecular weight PMMA is compared with three other types of resist: First the positive photo resist AZ P4620 will be discussed and then PMGI SF 23, which can be used as a deep UV, e-beam or X-ray resist. Finally SU-8, a new deep UV negative type of chemically amplified resist will be discussed. All these polymers are applied using the spin coating technique at thicknesses of between 1 and 36 μm

Micromachining Lithium Niobate for Rapid Prototyping of Resonant Biosensors

International Nuclear Information System (INIS)

Al-Shibaany, Zeyad Yousif Abdoon; Hedley, John; Huo, Dehong; Hu, Zhongxu

2014-01-01

Lithium niobate material is widely used in MEMS application due to its piezoelectric properties. This paper presents the micromachining process of lithium niobate to rapid prototype a resonant biosensor design. A high precision CNC machine was used to machine a sample of lithium niobate material at 5 different spindle speeds to find out the best conditions to machine this brittle material. A qualitative visual check of the surface was performed by using scanning electron microscopy, surface roughness was quantitatively investigated using an optical surface profiler and Raman spectroscopy to check the strain of the surface. Results show that the surface quality of the lithium niobate was significantly affected by the spindle speed with optimum conditions at 70k rpm giving a strained surface with 500 nm rms roughness

An analysis of electro-osmotic and magnetohydrodynamic heat pipes

International Nuclear Information System (INIS)

Harrison, M.A.

1988-01-01

Mechanically simple methods of improving heat transport in heat pipes are investigated. These methods are electro-osmotic and magnetohydrodynamic augmentation. For the electro-osmotic case, a detailed electrokinetic model is used. The electrokinetic model used includes the effects of pore surface curvature and multiple ion diffusivities. The electrokinetic model is extended to approximate the effects of elevated temperature. When the electro-osmotic model is combined with a suitable heat-pipe model, it is found that the electro-osmotic pump should be a thin membrane. Arguments are provided that support the use of a volatile electrolyte. For the magnetohydrodynamic case, a brief investigation is provided. A quasi-one-dimensional hydromagnetic duct flow model is used. This hydromagnetic model is extended to approximate flow effects unique to heat pipes. When combined with a suitable heat pipe model, it is found that there is no performance gain for the case considered. In fact, there are serious pressure-distribution problems that have not been previously recognized. Potential solutions to these pressure-distribution problems are suggested

Cavitational micro-particles: plasma formation mechanisms

International Nuclear Information System (INIS)

Bica, Ioan

2005-01-01

Cavitational micro-particles are a class to which the micro-spheres, the micro-tubes and the octopus-shaped micro-particles belong. The cavitational micro-particles (micro-spheres, micro-tubes and octopus-shaped micro-particles) at an environmental pressure. The micro-spheres, the micro-tubes and the ligaments of the octopus-shaped micro-particles are produced in the argon plasma and are formed of vapors with low values of the molar concentration in comparison with the molar density of the gas and vapor mixture, the first one on the unstable and the last two on the stable movement of the vapors. The ligaments of the octopus-shaped micro-particles are open at the top for well-chosen values of the sub-cooling of the vapor and gas cylinders. The nitrogen in the air favors the formation of pores in the wall of the micro-spheres. In this paper we present the cavitational micro-particles, their production in the plasma and some mechanisms for their formation in the plasma. (author)

Surface and elemental alterations of dental alloys induced by electro discharge machining (EDM).

Science.gov (United States)

Zinelis, Spiros

2007-05-01

To evaluate the surface and elemental alterations induced by electro discharge machining (EDM) on the surface of dental cast alloys used for the fabrication of implant retained meso- and super-structures. A completed cast model of an arch that received dental implants was used for the preparation of six wax patterns which were divided into three groups (Au, Co and Ti). The wax patterns of the Au and Co groups were invested with conventional phosphate-bonded silica-based investment material and the Ti group with magnesia-based investment material. The investment rings of the Au and Co groups were cast with an Au-Ag alloy (Stabilor G) and a Co-Cr base alloy (Okta C), respectively, while the investment rings of group Ti were cast with cp Ti (Biotan). One casting of each group was subjected to electro discharge machining (EDM); the other was conventionally ground and polished. The surface morphology and the elemental compositions of conventionally and EDM-finished surfaces were studied by SEM/X-ray EDS analysis. Six spectra were collected from each surface employing the area scan mode and the mean value of each element between conventionally and EDM-finished surfaces was statistically analyzed by t-test (a=0.05). Then the specimens of each group were cut perpendicular to their longitudinal axis and after metallographic grinding and polishing the cross-sections studied under the SEM. The EDM surfaces showed a significant increase in C due to the decomposition of the dielectric fluid during spark erosion. Moreover, a significant Cu uptake was noted on these surfaces from the decomposition of the Cu electrodes used for EDM. Cross-sectional analysis showed that all alloys developed a superficial zone (recast layer) varying from 2 microm for Au-Ag to 10 microm for Co-Cr alloy. The elemental composition of dental alloy surfaces is significantly altered after EDM treatment.

Acceleration sensitivity of micromachined pressure sensors

Science.gov (United States)

August, Richard; Maudie, Theresa; Miller, Todd F.; Thompson, Erik

1999-08-01

Pressure sensors serve a variety of automotive applications, some which may experience high levels of acceleration such as tire pressure monitoring. To design pressure sensors for high acceleration environments it is important to understand their sensitivity to acceleration especially if thick encapsulation layers are used to isolate the device from the hostile environment in which they reside. This paper describes a modeling approach to determine their sensitivity to acceleration that is very general and is applicable to different device designs and configurations. It also describes the results of device testing of a capacitive surface micromachined pressure sensor at constant acceleration levels from 500 to 2000 g's.

Nanoindentation and micro-mechanical fracture toughness of electrodeposited nanocrystalline Ni–W alloy films

International Nuclear Information System (INIS)

Armstrong, D.E.J.; Haseeb, A.S.M.A.; Roberts, S.G.; Wilkinson, A.J.; Bade, K.

2012-01-01

Nanocrystalline nickel–tungsten alloys have great potential in the fabrication of components for microelectromechanical systems. Here the fracture toughness of Ni–12.7 at.%W alloy micro-cantilever beams was investigated. Micro-cantilevers were fabricated by UV lithography and electrodeposition and notched by focused ion beam machining. Load was applied using a nanoindenter and fracture toughness was calculated from the fracture load. Fracture toughness of the Ni–12.7 at.%W was in the range of 1.49–5.14 MPa √m. This is higher than the fracture toughness of Si (another important microelectromechanical systems material), but considerably lower than that of electrodeposited nickel and other nickel based alloys. - Highlights: ► Micro-scale cantilevers manufactured by electro-deposition and focused ion beam machining. ► Nanoindenter used to perform micro-scale fracture test on Ni-13at%W micro-cantilevers. ► Calculation of fracture toughness of electrodeposited Ni-13at%W thin films. ► Fracture toughness values lower than that of nanocrystalline nickel.

Nanoindentation and micro-mechanical fracture toughness of electrodeposited nanocrystalline Ni-W alloy films

Energy Technology Data Exchange (ETDEWEB)

Armstrong, D.E.J., E-mail: david.armstrong@materials.ox.ac.uk [Department of Materials, University of Oxford, Parks Road, Oxford, OX1 3PH (United Kingdom); Haseeb, A.S.M.A. [Department of Mechanical Engineering, University of Malaya, 50603 Kuala Lumpur (Malaysia); Roberts, S.G.; Wilkinson, A.J. [Department of Materials, University of Oxford, Parks Road, Oxford, OX1 3PH (United Kingdom); Bade, K. [Institut fuer Mikrostrukturtechnik (IMT), Karlsruhe Institute of Technology, Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen (Germany)

2012-04-30

Nanocrystalline nickel-tungsten alloys have great potential in the fabrication of components for microelectromechanical systems. Here the fracture toughness of Ni-12.7 at.%W alloy micro-cantilever beams was investigated. Micro-cantilevers were fabricated by UV lithography and electrodeposition and notched by focused ion beam machining. Load was applied using a nanoindenter and fracture toughness was calculated from the fracture load. Fracture toughness of the Ni-12.7 at.%W was in the range of 1.49-5.14 MPa {radical}m. This is higher than the fracture toughness of Si (another important microelectromechanical systems material), but considerably lower than that of electrodeposited nickel and other nickel based alloys. - Highlights: Black-Right-Pointing-Pointer Micro-scale cantilevers manufactured by electro-deposition and focused ion beam machining. Black-Right-Pointing-Pointer Nanoindenter used to perform micro-scale fracture test on Ni-13at%W micro-cantilevers. Black-Right-Pointing-Pointer Calculation of fracture toughness of electrodeposited Ni-13at%W thin films. Black-Right-Pointing-Pointer Fracture toughness values lower than that of nanocrystalline nickel.

Wetting on micro-structured surfaces: modelling and optimization

DEFF Research Database (Denmark)

Cavalli, Andrea

-patterns, and suggests that there is a balance between optimal wetting properties and mechanical robustness of the microposts. We subsequently analyse liquid spreading on surfaces patterned with slanted microposts. Such a geometry induces unidirectional liquid spreading, as observed in several recent experiments. Our...... liquid spreading and spontaneous drop removal on superhydrophobic surfaces. We do this by applying different numerical techniques, suited for the specific topic. We first consider superhydrophobicity, a condition of extreme water repellency associated with very large static contact angles and low roll......The present thesis deals with the wetting of micro-structured surfaces by various fluids, and its goal is to elucidate different aspects of this complex interaction. In this work we address some of the most relevant topics in this field such as superhydrophobicity, oleophobicity, unidirectional...

Capillary origami of micro-machined micro-objects: Bi-layer conductive hinges

NARCIS (Netherlands)

Legrain, A.B.H.; Berenschot, Johan W.; Tas, Niels Roelof; Abelmann, Leon

2015-01-01

Recently, we demonstrated controllable 3D self-folding by means of capillary forces of silicon-nitride micro-objects made of rigid plates connected to each other by flexible hinges (Legrain et al., 2014). In this paper, we introduce platinum electrodes running from the substrate to the plates over

Sub-Grid Modeling of Electrokinetic Effects in Micro Flows

Science.gov (United States)

Chen, C. P.

2005-01-01

Advances in micro-fabrication processes have generated tremendous interests in miniaturizing chemical and biomedical analyses into integrated microsystems (Lab-on-Chip devices). To successfully design and operate the micro fluidics system, it is essential to understand the fundamental fluid flow phenomena when channel sizes are shrink to micron or even nano dimensions. One important phenomenon is the electro kinetic effect in micro/nano channels due to the existence of the electrical double layer (EDL) near a solid-liquid interface. Not only EDL is responsible for electro-osmosis pumping when an electric field parallel to the surface is imposed, EDL also causes extra flow resistance (the electro-viscous effect) and flow anomaly (such as early transition from laminar to turbulent flow) observed in pressure-driven microchannel flows. Modeling and simulation of electro-kinetic effects on micro flows poses significant numerical challenge due to the fact that the sizes of the double layer (10 nm up to microns) are very thin compared to channel width (can be up to 100 s of m). Since the typical thickness of the double layer is extremely small compared to the channel width, it would be computationally very costly to capture the velocity profile inside the double layer by placing sufficient number of grid cells in the layer to resolve the velocity changes, especially in complex, 3-d geometries. Existing approaches using "slip" wall velocity and augmented double layer are difficult to use when the flow geometry is complicated, e.g. flow in a T-junction, X-junction, etc. In order to overcome the difficulties arising from those two approaches, we have developed a sub-grid integration method to properly account for the physics of the double layer. The integration approach can be used on simple or complicated flow geometries. Resolution of the double layer is not needed in this approach, and the effects of the double layer can be accounted for at the same time. With this

Cost determination of the electro-mechanical equipment of a small hydro-power plant

Energy Technology Data Exchange (ETDEWEB)

Ogayar, B.; Vidal, P.G. [Grupo de Investigacion IDEA, Escuela Politecnica Superior, University of Jaen, Campus de Las Lagunillas, s/n. 23071-Jaen (Spain)

2009-01-15

One of the most important elements on the recovery of a small hydro-power plant is the electro-mechanical equipment (turbine-alternator), since the cost of the equipment means a high percentage of the total budget of the plant. The present paper intends to develop a series of equations which determine its cost from basic parameters such as power and net head. These calculations are focused at a level of previous study, so it will be necessary to carry out the engineering project and request a budget to companies specialized on the construction of electro-mechanical equipment to know its cost more accurately. Although there is a great diversity in the typology of turbines and alternators, data from manufacturers which cover all the considered range have been used. The above equations have been developed for the most common of turbines: Pelton, Francis, Kaplan and semiKaplan for a power range below 2 MW. The obtained equations have been validated with data from real installations which have been subject to analysis by engineering companies working on the assembly and design of small plants. (author)

MEMS-based Micro Coriolis mass flow sensor

NARCIS (Netherlands)

Haneveld, J.; Brouwer, Dannis Michel; Mehendale, A.; Zwikker, R.; Lammerink, Theodorus S.J.; de Boer, Meint J.; Wiegerink, Remco J.

2008-01-01

We have realized a micromachined micro Coriolis flow sensor consisting of a silicon nitride resonant tube of 40 μm diameter and 1.2 μm wall thickness. First measurements with both gas and liquid flows have demonstrated an unprecedented mass flow resolution in the order of 10 mg/hr at a full scale

Influences of lubricant pocket geometry and working conditions upon micro lubrication mechanisms in upsetting and strip drawing

DEFF Research Database (Denmark)

Shimizu, Ichiro; Martins, P. A. F.; Bay, Niels

2010-01-01

, during upsetting and strip drawing, by means of a rigid-viscoplastic finite-element formulation. Special emphasis is placed on the effect of pocket geometry on the build-up of hydrostatic pressure, which is responsible for the onset of micro-lubrication mechanisms. A good agreement is found between......Micro-lubricant pockets located in the surface of plastically deforming workpieces are recognised to improve the performance of fluid lubrication in a metal-forming process. This work investigates the joint influence of pocket geometry and process working conditions on micro-lubrication mechanisms...

Variable load failure mechanism for high-speed load sensing electro-hydrostatic actuator pump of aircraft

Directory of Open Access Journals (Sweden)

Cun SHI

2018-05-01

Full Text Available This paper presents a novel transient lubrication model for the analysis of the variable load failure mechanism of high-speed pump used in Load Sensing Electro-Hydrostatic Actuator (LS-EHA. Focusing on the slipper/swashplate pair partial abrasion, which is considered as the dominant failure mode in the high-speed condition, slipper dynamic models are established. A forth sliding motion of the slipper on the swashplate surface is presented under the fact that the slipper center of mass will rotate around the center of piston ball when the swashplate angle is dynamically adjusted. Besides, extra inertial tilting moments will be produced for the slipper based on the theorem on translation of force, which will increase rapidly when LS-EHA pump operates under high-speed condition. Then, a dynamic lubricating model coupling with fluid film thickness field, temperature field and pressure field is proposed. The deformation effects caused by thermal deflection and hydrostatic pressure are considered. A numerical simulation model is established to validate the effectiveness and accuracy of the proposed model. Finally, based on the load spectrum of aircraft flight profile, the variable load conditions and the oil film characteristics are analyzed, and series of variable load rules of oil film thickness with variable speed/variable pressure/variable displacement are concluded. Keywords: Coupling lubrication model, Electro-Hydrostatic Actuator (EHA, High-speed pump, Partial abrasion, Slipper pair, Variable load

Micro-system inertial sensing technology overview.

Energy Technology Data Exchange (ETDEWEB)

Allen, James Joe

2009-02-01

The purpose of this report is to provide an overview of Micro-System technology as it applies to inertial sensing. Transduction methods are reviewed with capacitance and piezoresistive being the most often used in COTS Micro-electro-mechanical system (MEMS) inertial sensors. Optical transduction is the most recent transduction method having significant impact on improving sensor resolution. A few other methods are motioned which are in a R&D status to hopefully allow MEMS inertial sensors to become viable as a navigation grade sensor. The accelerometer, gyroscope and gravity gradiometer are the type of inertial sensors which are reviewed in this report. Their method of operation and a sampling of COTS sensors and grade are reviewed as well.

Degradation efficiency and mechanism of azo dye RR2 by a novel ozone aerated internal micro-electrolysis filter.

Science.gov (United States)

Zhang, Xian-Bing; Dong, Wen-Yi; Sun, Fei-Yun; Yang, Wei; Dong, Jiao

2014-07-15

A newly designed ozone aerated internal micro-electrolysis filter (OIEF) was developed to investigate its degradation efficiencies and correlated reaction mechanisms of RR2 dye. Complete decolorization and 82% TOC removal efficiency were stably achieved in OIEF process. Based on the comprehensive experimental results, an empirical equation was proposed to illustrate the effects of initial dye concentration and ozone dosage rate on color removal. The results indicated that OIEF process could be operated at wide pH range without significant treatment efficiencies change, while the optimum pH for RR2 dye degradation was 9.0. There were 15, 8 and 6 kinds of identified intermediates during ozonation, IE and OIEF treatment processes, respectively. Less identified intermediates and their lower concentrations in OIEF may attribute to its rather excellent mineralization performance. It was found that ozonation, Fe(2+)/Fe(3+) catalyzed ozonation, the redox reactions of electro-reduction and electro-oxidation are the most important mechanisms in OIEF process. The catalytic effect of Fe(2+)/Fe(3+) would induce mutual conversion between dissolved Fe(2+) and Fe(3+), and then decrease the dissolution rate of ZVI. The excellent treatment performance proved that the OIEF process is one promising technology applied for reactive azo dyes and other refractory wastewater treatment. Copyright © 2014 Elsevier B.V. All rights reserved.

Microfabrication on a curved surface using 3D microlens array projection

International Nuclear Information System (INIS)

Li, Lei; Yi, Allen Y

2009-01-01

Accurate three-dimensional microstructures on silicon or other substrates are becoming increasingly important for optical, electronic, biomedical and medical applications. Traditional microfabrication processes based on cleanroom lithography and dry or wet etching processes are essentially two-dimensional methods. In the past, complicated procedures were designed to create some three-dimensional microstructures; however, these processes were mainly used to create features on planar silicon wafer substrates using the bulk silicon machining technique. In a major departure from previous micromachining processes, a microfabrication process based on microlens projection is presented in this paper. The proposed microfabrication system will have the capabilities of a typical conventional micromachining process plus the unique true three-dimensional replication features based on microlenses that were created on a steep curved substrate. These microlenses were precisely fabricated with a specific pattern on the curved surface that can be used to create microstructures on a pre-defined nonplanar substrate where a layer of photoresist was spin coated. After proper exposure and development, the desired micro patterns are created on the photoresist layer. These micro features can eventually be replicated on the substrate via wet or dry etching processes. The results show that the fabricated three-dimensional microlens array has very high dimensional accuracy and the profile error is less than 6 µm over the entire surface

A fluid-coupled transmitting CMUT operated in collapse mode : Semi-analytic modeling and experiments

NARCIS (Netherlands)

Pekař, Martin; van Nispen, Stephan H.M.; Fey, Rob H.B.; Shulepov, Sergei; Mihajlović, Nenad; Nijmeijer, Henk

2017-01-01

An electro-mechanical, semi-analytic, reduced-order (RO) model of a fluid-loaded transmitting capacitive-micromachined ultrasound transducer (CMUT) operated in collapse mode is developed. Simulation of static deflections, approximated by a linear combination of six mode shapes, are benchmarked

Electro-decontamination of cementitious materials

International Nuclear Information System (INIS)

Ben-Hadj-Hassine, S.

2012-01-01

The end of operations in nuclear facilities is followed by various decontamination and decommissioning operations. Similar to other electrochemical techniques such as re-alkalinisation and chloride extraction, an electrokinetic remediation process is being developed as a specific method for deeply contaminated concrete structures. Two cements, an ordinary Portland and a 30% slag cement, have been chosen for the conducted work.Mortars and concretes are contaminated by adding non-radioactive cesium in the batch water, cesium being a representative specie of deep encountered contaminants. The conducted experimental and numerical work have focused on three main aspects: characterizing and understanding the cesium transport mechanisms, assessing the electro-remediation process at lab-scale and evaluating the real scale constraints. Using existing knowledge of chloride transport mechanisms, experiments have been conducted to characterize the cesium interactions with cementitious phase and ionic transport in saturated materials. A numerical model have then been developed to describe the cesium transport, taking into account the ionic activity coefficients and interactions with solid phases. Indeed, lab-scale experiments have demonstrated that electro-remediation reduced to 20-50% the initially contained cesium after a three weeks treatment. Treated samples analysis confirmed that deeply diffused cesium is migrating to the surface. Moreover, conducted experiments showed the consistency between the different materials properties, applied currents and decontamination efficiency. A comparative analysis of experiments carried on samples with different shapes, formulations and contamination modes helped assessing and optimizing the process efficiency for various continuous and variable applied currents. Finally, electro-remediation experiments have also been carried on 1m 2 concrete slabs. Liquid catholyte and anolyte solutions are replaced by alumina gels and cellulose pastes

Modification and Performance Evaluation of a Low Cost Electro-Mechanically Operated Creep Testing Machine

Directory of Open Access Journals (Sweden)

John J. MOMOH

2010-12-01

Full Text Available Existing mechanically operated tensile and creep testing machine was modified to a low cost, electro-mechanically operated creep testing machine capable of determining the creep properties of aluminum, lead and thermoplastic materials as a function of applied stress, time and temperature. The modification of the testing machine was necessitated by having an electro-mechanically operated creep testing machine as a demonstration model ideal for use and laboratory demonstrations, which will provide an economical means of performing standard creep experiments. The experimental result is a more comprehensive understanding of the laboratory experience, as the technology behind the creep testing machine, the test methodology and the response of materials loaded during experiment are explored. The machine provides a low cost solution for Mechanics of Materials laboratories interested in creep testing experiment and demonstration but not capable of funding the acquisition of commercially available creep testing machines. Creep curves of strain versus time on a thermoplastic material were plotted at a stress level of 1.95MPa, 3.25MPa and 4.55MPa and temperature of 20oC, 40oC and 60oC respectively. The machine is satisfactory since it is always ready for operation at any given time.

Design and Analysis of a Micromachined LC Low Pass Filter For 2.4GHz Application

Science.gov (United States)

Saroj, Samruddhi R.; Rathee, Vishal R.; Pande, Rajesh S.

2018-02-01

This paper reports design and analysis of a passive low pass filter with cut-off frequency of 2.4 GHz using MEMS (Micro Electro-Mechanical Systems) technology. The passive components such as suspended spiral inductors and metal-insulator-metal (MIM) capacitor are arranged in T network form to implement LC low pass filter design. This design employs a simple approach of suspension thereby reducing parasitic losses to eliminate the performance degrading effects caused by integrating an off-chip inductor in the filter circuit proposed to be developed on a low cost silicon substrate using RF-MEMS components. The filter occupies only 2.1 mm x 0.66 mm die area and is designed using micro-strip transmission line placed on a silicon substrate. The design is implemented in High Frequency Structural Simulator (HFSS) software and fabrication flow is proposed for its implementation. The simulated results show that the design has an insertion loss of -4.98 dB and return loss of -2.60dB.

Hybrid tooling technologies and standardization for the manufacturing of inserts for micro injection molding

DEFF Research Database (Denmark)

Tosello, Guido; Fillon, Bertrand; Azcarate, Sabino

2007-01-01

This paper is based on the European Platform’s activities within the 4M Network of Excellence “Multi-Material Micro Manufacturing”. To overpass limitations of the current existing micro tooling capabilities, a new generation of micro hybrid tooling technologies for micro replication was developed....... A metrological approach was applied to standardize the employed tooling processes (micro milling, µEDM, laser micromachining, electrochemical µ-milling). The micro tools were then tested with different polymers (PP, PP + nano fillers, PC, COC). The paper provides a comparison of these technologies concerning...

An analytical solution for the magneto-electro-elastic bimorph beam forced vibrations problem

International Nuclear Information System (INIS)

Milazzo, A; Orlando, C; Alaimo, A

2009-01-01

Based on the Timoshenko beam theory and on the assumption that the electric and magnetic fields can be treated as steady, since elastic waves propagate very slowly with respect to electromagnetic ones, a general analytical solution for the transient analysis of a magneto-electro-elastic bimorph beam is obtained. General magneto-electric boundary conditions can be applied on the top and bottom surfaces of the beam, allowing us to study the response of the bilayer structure to electromagnetic stimuli. The model reveals that the magneto-electric loads enter the solution as an equivalent external bending moment per unit length and as time-dependent mechanical boundary conditions through the definition of the bending moment. Moreover, the influences of the electro-mechanic, magneto-mechanic and electromagnetic coupling on the stiffness of the bimorph stem from the computation of the beam equivalent stiffness constants. Free and forced vibration analyses of both multiphase and laminated magneto-electro-elastic composite beams are carried out to check the effectiveness and reliability of the proposed analytic solution

Modelling and dynamics of a self-sustained electrostatic micro electro mechanical system

International Nuclear Information System (INIS)

Kwuimy, C.A. Kitio; Woafo, P.

2009-06-01

This paper deals with the study of a model of self-sustained electrostatic micro Electromechanical system (MEMS). The electrical part contains two nonlinear components: a nonlinear resistance with a negative slope in the current-voltage characteristics and a capacitor having a cubic form as the charge-voltage characteristics. The modal approximation and the finite differences numerical scheme are used to analyze the dynamical behavior of the system: resonant oscillations and bifurcation diagram leading to chaos are observed for some values of the polarization voltage. Hints of applications of the device are given. (author)

Influence of porosity and pore shape on structural, mechanical and biological properties of poly ϵ-caprolactone electro-spun fibrous scaffolds.

Science.gov (United States)

Fuller, Kieran P; Gaspar, Diana; Delgado, Luis M; Pandit, Abhay; Zeugolis, Dimitrios I

2016-05-01

Electro-spun scaffolds are utilized in a diverse spectrum of clinical targets, with an ever-increasing quantity of work progressing to clinical studies and commercialization. The limited number of conformations in which the scaffolds can be fabricated hampers their wide acceptance in clinical practice. Herein, we assessed a single-strep fabrication process for predesigned electro-spun scaffold preparation and the ramifications of the introduction of porosity (0, 30, 50, 70%) and pore shape (circle, rhomboid, square) on structural, mechanical (tensile and ball burst) and biological (dermal fibroblast and THP-1) properties. The collector design did not affect the fibrous nature of the scaffold. Modulation of the porosity and pore shape offered control over the mechanical properties of the scaffolds. Neither the porosity nor the pore shape affected cellular (dermal fibroblast and THP-1) response. Overall, herein we provide evidence that electro-spun scaffolds of controlled architecture can be fabricated with fibrous fidelity, adequate mechanical properties and acceptable cytocompatibility for a diverse range of clinical targets.

Static and dynamic micro deformable mirror characterization by phase-shifting and time-averaged interferometry

Science.gov (United States)

Liotard, Arnaud; Zamkotsian, Frédéric

2017-11-01

The micro-opto-electro-mechanical systems (MOEMS), based on mature technologies of micro-electronics, are essential in the design of future astronomical instruments. One of these key-components is the microdeformable mirror for wave-front correction. Very challenging topics like search of exo-planets could greatly benefit from this technology. Design, realization and characterization of micro-Deformable Mirrors are under way at Laboratoire d'Astrophysique de Marseille (LAM) in collaboration with Laboratoire d'Analyse et d'Architecture des Systèmes (LAAS). In order to measure the surface shape and the deformation parameters during operation of these devices, a high-resolution Twyman-Green interferometer has been developed. Measurements have been done on a tiltable micro-mirror (170*100μm2) designed by LAM-LAAS and realized by an American foundry, and also on an OKO deformable mirror (15mm diameter). Static characterization is made by phase shifting interferometry and dynamic measurements have been made by quantitative time-averaged interferometry. The OKO mirror has an actuator stroke of 370+/-10nm for 150V applied and its resonant frequency is 1170+/-50 Hz, and the tiltable mirror has a rotation cut-off frequency of 31+/-3 kHz.

Formation mechanism and adhesive strength of a hydroxyapatite/TiO{sub 2} composite coating on a titanium surface prepared by micro-arc oxidation

Energy Technology Data Exchange (ETDEWEB)

Liu, Shimin, E-mail: lshm1216@163.com [Department of Gem and Material Technique, Tianjin University of Commerce, Tianjin 300134 (China); Li, Baoe; Liang, Chunyong; Wang, Hongshui [School of Materials Science and Engineering, Hebei University of Technology, Tianjin 300130 (China); Qiao, Zhixia [School of Mechanical Engineering, Tianjin University of Commerce, Tianjin 300134 (China)

2016-01-30

Graphical abstract: - Highlights: • Hydroxyapatite/TiO{sub 2} composite coating was prepared by one-step micro-arc oxidation. • The formation mechanism of composite coating was investigated. • Higher bonding strength between hydroxyapatite and TiO{sub 2} layer was obtained. - Abstract: A hydroxyapatite (HA)/TiO{sub 2} composite coating was prepared on a titanium surface by one-step micro-arc oxidation (MAO). The formation mechanism of the composite coating was investigated and the adhesion of the coating to the substrate was also measured. The results showed that flocculent structures could be obtained during the early stages of treatment. As the treatment period extended, increasing amounts of Ca–P precipitate appeared on the surface, and the flocculent morphology transformed into a plate-like morphology. Then the plate-like calcium and phosphate salt self-assembled to form flower-like apatite. The Ca/P atomic ratio gradually decreased, indicating that the amounts of Ca{sup 2+} ions which diffused into the coating decreased more rapidly than that of PO{sub 4}{sup 3−} or HPO{sub 4}{sup 2−}. The adhesive strength between the apatite and TiO{sub 2} coating was improved. This improvement is attributed to the interlocking effect between the apatite and TiO{sub 2} layer which formed simultaneously during the early stages of the one-step MAO. This study shows that it is a promising method to prepare bioactive coating on a titanium surface.

MEMS Micro-Valve for Space Applications

Science.gov (United States)

Chakraborty, I.; Tang, W. C.; Bame, D. P.; Tang, T. K.

1998-01-01

We report on the development of a Micro-ElectroMechanical Systems (MEMS) valve that is designed to meet the rigorous performance requirements for a variety of space applications, such as micropropulsion, in-situ chemical analysis of other planets, or micro-fluidics experiments in micro-gravity. These systems often require very small yet reliable silicon valves with extremely low leak rates and long shelf lives. Also, they must survive the perils of space travel, which include unstoppable radiation, monumental shock and vibration forces, as well as extreme variations in temperature. Currently, no commercial MEMS valve meets these requirements. We at JPL are developing a piezoelectric MEMS valve that attempts to address the unique problem of space. We begin with proven configurations that may seem familiar. However, we have implemented some major design innovations that should produce a superior valve. The JPL micro-valve is expected to have an extremely low leak rate, limited susceptibility to particulates, vibration or radiation, as well as a wide operational temperature range.

Mechanical Properties of Plug Welds after Micro-Jet Cooling

Directory of Open Access Journals (Sweden)

Hadryś D.

2016-12-01

Full Text Available New technology of micro-jet welding could be regarded as a new way to improve mechanical properties of plug welds. The main purpose of that paper was analyzing of mechanical properties of plug welds made by MIG welding method with micro-jet cooling. The main way for it was comparison of plug welds made by MIG welding method with micro-jet cooling and plug welds made by ordinary MIG welding method. It is interesting for steel because higher amount of acicular ferrite (AF in weld metal deposit (WMD is obtained in MIG welding method with micro-jet cooling in relation to ordinary MIG welding method. This article presents the influence of the cooling medium and the number of micro-jet streams on mechanical properties of the welded joint. Mechanical properties were described by force which is necessary to destroy weld joint.

Design and fabrication of an ac-electro-osmosis micropump with 3D high-aspect-ratio electrodes using only SU-8

International Nuclear Information System (INIS)

Rouabah, Hamza A; Morgan, Hywel; Green, Nicolas G; Park, Benjamin Y; Zaouk, Rabih B; Madou, Marc J

2011-01-01

Lab-on-a-chip devices require integrated pumping and fluid control in microchannels. A recently developed mechanism that can produce fluid flow is an integrated ac-electro-osmosis micropump. However, like most electrokinetic pumps, ac-electro-osmotic pumps are incapable of handling backpressure as the pumping force mechanism acts on the surface of the fluid rather than the bulk. This paper presents a novel 3D electrode structure designed to overcome this limitation. The electrodes are fabricated using carbon-MEMS technology based on the pyrolysis of the photo-patternable polymer SU-8. The novel ac-electro-osmosis micropump shows an increase in the flow velocity compared to planar electrodes.

Capacitive MEMS-based sensors : thermo-mechanical stability and charge trapping

NARCIS (Netherlands)

van Essen, M.C.

2009-01-01

Micro-Electro Mechanical Systems (MEMS) are generally characterized as miniaturized systems with electrostatically driven moving parts. In many cases, the electrodes are capacitively coupled. This basic scheme allows for a plethora of specifications and functionality. This technology has presently

Disc type thermal actuator with straight beams for angular motion

International Nuclear Information System (INIS)

Anwar, M. Arefin; Packirisamy, Muthukumaran; Ahmed, A.K. Waiz

2013-01-01

Motion of a micro thermal actuator largely depends on its structural topology. This paper presents designs for a novel rotary type micro thermal actuator. This actuator has unique arrangement of hot segments around the cold segment. Upon application of potential difference, hot segments expand against the cold segment of disc and make the cold disc rotate about its center. This rotary motion can be used for various optical applications like, switching, attenuation and diffraction. The actuator has been fabricated using poly MUMPS process technology. An analytical model was used for predicting steady state temperature profile along the actuator length and rotational behavior of the cold disc under different applied voltages. A finite element analysis (FEA) was carried out to predict the behavior of the actuator by defining an air volume around the structure and also between structure and substrate. Finally testing was done for predicting feasibility of the actuator. Comparison of the rotational behavior obtained from both analytical model and FEA with that of obtained from testing shows close agreement. -- Highlights: ► Electro-thermo-mechanical modeling and verification of rotary micro thermal actuator. ► Modeling with conduction, convection and radiation modes for the air gap below 3 micron. ► In micro level, shape factor and material resistivity were estimated and verified through I–V characteristics. ► Two different designs of different shape factors were designed, fabricated and tested. ► The devices were fabricated using surface micromachining technology and tested for verification

Development of a resilient mechanical sealing solution to resist electro corrosion in ultrapure feedwater applications

Energy Technology Data Exchange (ETDEWEB)

Loenhout, Gerard van [Flowservice Flow Solutions Division, Etten-Leur (Netherlands); Enders, Klaus; Schmerberg, Rainer [Vattenfall Europe Generation AG, Peitz (Germany)

2012-11-01

Ever since the introduction of mechanical seals on high speed boiler feed pumps in the sixties, mechanical seals have proven to be a reliable, cost effective sealing method. However, since the introduction of combined water treatment chemistry used in today's modern fossil-fuelled power stations, keeping mechanical seal reliability high, became a challenge. A pragmatic approach is presented. A resilient sealing solution was developed to resist electro corrosion for such critical feed water pumps. (orig.)

Development of a novel non-contact inspection technique to detect micro cracks under the surface of a glass substrate by thermal stress-induced light scattering method

Science.gov (United States)

Sakata, Yoshitaro; Terasaki, Nao; Nonaka, Kazuhiro

2017-05-01

Fine polishing techniques, such as a chemical mechanical polishing treatment, are important techniques in glass substrate manufacturing. However, these techniques may cause micro cracks under the surface of glass substrates because they used mechanical friction. A stress-induced light scattering method (SILSM), which was combined with light scattering method and mechanical stress effects, was proposed for inspecting surfaces to detect polishing-induced micro cracks. However, in the conventional SILSM, samples need to be loaded with physical contact, and the loading point is invisible in transparent materials. Here, we introduced a novel non-contact SILSM using a heating device. A glass substrate was heated first, and then the light scattering intensity of micro cracks was detected by a cooled charge-couple device camera during the natural cooling process. Results clearly showed during the decreasing surface temperature of a glass substrate, appropriate thermal stress is generated for detecting micro cracks by using the SILSM and light scattering intensity from micro cracks changes. We confirmed that non-contact thermal SILSM (T-SILSM) can detect micro cracks under the surface of transparent materials.

Real-time control of ultrafast laser micromachining by laser-induced breakdown spectroscopy

International Nuclear Information System (INIS)

Tong Tao; Li Jinggao; Longtin, Jon P.

2004-01-01

Ultrafast laser micromachining provides many advantages for precision micromachining. One challenging problem, however, particularly for multilayer and heterogeneous materials, is how to prevent a given material from being ablated, as ultrafast laser micromachining is generally material insensitive. We present a real-time feedback control system for an ultrafast laser micromachining system based on laser-induced breakdown spectroscopy (LIBS). The characteristics of ultrafast LIBS are reviewed and discussed so as to demonstrate the feasibility of the technique. Comparison methods to identify the material emission patterns are developed, and several of the resulting algorithms were implemented into a real-time computer control system. LIBS-controlled micromachining is demonstrated for the fabrication of microheater structures on thermal sprayed materials. Compared with a strictly passive machining process without any such feedback control, the LIBS-based system provides several advantages including less damage to the substrate layer, reduced machining time, and more-uniform machining features

A control strategy for electro-magneto-mechanical system based on virtual system model

Energy Technology Data Exchange (ETDEWEB)

Kim, Hong Youn; Heo, Hoon [Dept. of Control and Instrumentation Engineering, Korea University, Seoul (Korea, Republic of); Yun, Young Min [TPC Mechatronics Co., Ltd., Incheon (Korea, Republic of)

2016-09-15

A new approach to the control of electro-magneto-mechanical system is proposed in this paper. Conventionally, these systems are controlled based on the Maxwell system model via an on-off or PID control technique, which displays acceptable performance in the low frequency region, but not in the high frequency region where position control performance is greatly degraded. In order to improve the performance, a newly developed virtual 2nd order system modeling technique, SSID, is adopted for a complex electro-magnetomechanical system in the study. This technique states that any unknown system exposed to a random disturbance with unknown intensity can be identified in terms of a virtual 2nd order system model via the inverse process of a certain stochastic analysis. As a typical hybrid system, a solenoid valve is used as the target electro-magneto-mechanical system to study the modeling of the virtual 2nd order system. In order to confirm the performance of the proposed control strategy, autotuning PID controller in PWM mode is utilized. Simulations based on the conventional Maxwell system model with control via the bang-bang, autotuning PID, and the proposed virtual 2nd order system model approaches are conducted using MATLAB Simulink. Performance of these three systems in the low and high frequency bands is also compared. The simulation results reveal that the control performance of the virtual 2nd order system model is much improved compared with that of the Maxwell system model under autotuning PID and bang-bang controls in both low and high frequency regions, where the error is drastically reduced to approximately 1/5 of the original value.

Mechanical and electro-rheological properties of electrospun poly(vinyl alcohol) nanofibre mats filled with carbon black nanoparticles

International Nuclear Information System (INIS)

Chuangchote, Surawut; Sirivat, Anuvat; Supaphol, Pitt

2007-01-01

The present contribution reports, for the first time, the mechanical and electro-rheological properties of electrospun poly(vinyl alcohol) (PVA) nanofibre mats with or without the incorporation of carbon black (CB) nanoparticles. The effects of sonication and the addition of CB on morphological appearance, average diameter of the as-spun fibre mats, and that of the individual fibres, were thoroughly investigated. Incorporation of CB (1-10% based on the weight of PVA) in 10% w/v PVA solution did not affect the morphology and average diameter of the obtained fibres (∼160 nm), but it affected both the mechanical and the electro-rheological properties of the as-spun PVA/CB fibre mats, in which the mats became more rigid with the addition and increasing amount of CB

Kinetics of Carbon Monoxide Electro-Oxidation in Solid-Oxide Fuel Cells from Ni-YSZ Patterned-Anode Measurements

KAUST Repository

Hanna, J.; Lee, W. Y.; Ghoniem, A. F.

2013-01-01

A mathematical model is developed around the framework of a reduced mechanism describing electrochemical oxidation of carbon monoxide on Ni-YSZ patterned anodes. The electro-oxidation mechanism involves three reactions, one describing adsorption/ desorption of COonNi, and two single-electron charge-transfer steps inwhich the surface adsorbate CO(Ni) participates directly. These steps are coupled with surface transport in a reaction-diffusion model for which analytic equilibrium and steady-state solutions are derived. As much as possible, we make use of existing, independent, published information about heterogeneous chemistry, surface transport, and other model parameters. The only unknowns in our model are taken to be the kinetic rate constants of the electrochemical reactions, which we evaluate by fitting the model predictions to previously published patterned-anode experiments [B. Habibzadeh, Ph.D. Thesis, University of Maryland, College Park, MD, USA (2007)]. The results show that diffusion of CO on the Ni surface to the three-phase boundary is the rate-controlling process for CO electro-oxidation. Moreover, from a reaction standpoint, the charge-transfer process is dominated by a slow step involving CO(Ni). These findings collectively demonstrate the critical dependence of the electro-oxidation process to the direct participation of CO. © 2013 The Electrochemical Society. All rights reserved.

Kinetics of Carbon Monoxide Electro-Oxidation in Solid-Oxide Fuel Cells from Ni-YSZ Patterned-Anode Measurements

KAUST Repository

Hanna, J.

2013-04-17

A mathematical model is developed around the framework of a reduced mechanism describing electrochemical oxidation of carbon monoxide on Ni-YSZ patterned anodes. The electro-oxidation mechanism involves three reactions, one describing adsorption/ desorption of COonNi, and two single-electron charge-transfer steps inwhich the surface adsorbate CO(Ni) participates directly. These steps are coupled with surface transport in a reaction-diffusion model for which analytic equilibrium and steady-state solutions are derived. As much as possible, we make use of existing, independent, published information about heterogeneous chemistry, surface transport, and other model parameters. The only unknowns in our model are taken to be the kinetic rate constants of the electrochemical reactions, which we evaluate by fitting the model predictions to previously published patterned-anode experiments [B. Habibzadeh, Ph.D. Thesis, University of Maryland, College Park, MD, USA (2007)]. The results show that diffusion of CO on the Ni surface to the three-phase boundary is the rate-controlling process for CO electro-oxidation. Moreover, from a reaction standpoint, the charge-transfer process is dominated by a slow step involving CO(Ni). These findings collectively demonstrate the critical dependence of the electro-oxidation process to the direct participation of CO. © 2013 The Electrochemical Society. All rights reserved.

Modelling electro-active polymers with a dispersion-type anisotropy

Science.gov (United States)

Hossain, Mokarram; Steinmann, Paul

2018-02-01

We propose a novel constitutive framework for electro-active polymers (EAPs) that can take into account anisotropy with a chain dispersion. To enhance actuation behaviour, particle-filled EAPs become promising candidates nowadays. Recent studies suggest that particle-filled EAPs, which can be cured under an electric field during the manufacturing time, do not necessarily form perfect anisotropic composites, rather they create composites with dispersed chains. Hence in this contribution, an electro-mechanically coupled constitutive model is devised that considers the chain dispersion with a probability distribution function in an integral form. To obtain relevant quantities in discrete form, numerical integration over the unit sphere is utilized. Necessary constitutive equations are derived exploiting the basic laws of thermodynamics that result in a thermodynamically consistent formulation. To demonstrate the performance of the proposed electro-mechanically coupled framework, we analytically solve a non-homogeneous boundary value problem, the extension and inflation of an axisymmetric cylindrical tube under electro-mechanically coupled load. The results capture various electro-mechanical couplings with the formulation proposed for EAP composites.

Mechanical Robustness and Hermeticity Monitoring for MEMS Thin Film Encapsulation

NARCIS (Netherlands)

Santagata, F.

2011-01-01

Many Micro-Electro-Mechanical-Systems (MEMS) require encapsulation, to prevent delicate sensor structures being exposed to external perturbations such as dust, humidity, touching, and gas pressure. An upcoming and cost-effective way of encapsulation is zero-level packaging or thin-film

Bioactivity of cellulose acetate/hydroxyapatite nanoparticle composite fiber by an electro-spinning process.

Science.gov (United States)

Kwak, Dae Hyun; Lee, Eun Ju; Kim, Deug Joong

2014-11-01

Hydroxyapatite/cellulose acetate composite webs were fabricated by an electro-spinning process. This electro-spinning process makes it possible to fabricate complex three-dimensional shapes. Nano fibrous web consisting of cellulose acetate and hydroxyapatite was produced from their mixture solution by using an electro-spinning process under high voltage. The surface of the electro-spun fiber was modified by a plasma and alkaline solution in order to increase its bioactivity. The structure, morphology and properties of the electro-spun fibers were investigated and an in-vitro bioactivity test was evaluated in simulated body fluid (SBF). Bioactivity of the electro-spun web was enhanced with the filler concentration and surface treatment. The surface changes of electro-spun fibers modified by plasma and alkaline solution were investigated by FT-IR (Fourier Transform Infrared Spectroscopy) and XPS (X-ray Photoelectron Spectroscopy).

TiO2 micro-nano-hybrid surface to alleviate biological aging of UV-photofunctionalized titanium.

Science.gov (United States)

Iwasa, Fuminori; Tsukimura, Naoki; Sugita, Yoshihiko; Kanuru, Rajita Kodali; Kubo, Katsutoshi; Hasnain, Hafiz; Att, Wael; Ogawa, Takahiro

2011-01-01

Bioactivity and osteoconductivity of titanium degrade over time after surface processing. This time-dependent degradation is substantial and defined as the biological aging of titanium. UV treatment has shown to reactivate the aged surfaces, a process known as photofunctionalization. This study determined whether there is a difference in the behavior of biological aging for titanium with micro-nano-hybrid topography and titanium with microtopography alone, following functionalization. Titanium disks were acid etched to create micropits on the surface. Micro-nano-hybrid surfaces were created by depositioning 300-nm diameter TiO(2) nodules onto the micropits using a previously established self-assembly protocol. These disks were stored for 8 weeks in the dark to allow sufficient aging, then treated with UV light for 48 hours. Rat bone marrow-derived osteoblasts were cultured on fresh disks (immediately after UV treatment), 3-day-old disks (disks stored for 3 days after UV treatment), and 7-day- old disks. The rates of cell attachment, spread, proliferation, and levels of alkaline phosphatase activity, and calcium deposition were reduced by 30%-50% on micropit surfaces, depending on the age of the titanium. In contrast, 7-day-old hybrid surfaces maintained equivalent levels of bioactivity compared with the fresh surfaces. Both micropit and micro-nano-hybrid surfaces were superhydrophilic immediately after UV treatment. However, after 7 days, the micro-nano- hybrid surfaces became hydrorepellent, while the micropit surfaces remained hydrophilic. The sustained bioactivity levels of the micro-nano-hybrid surfaces were nullified by treating these surfaces with Cl(-)anions. A thin TiO(2) coating on the micropit surface without the formation of nanonodules did not result in the prevention or alleviation of the time-dependent decrease in biological activity. In conclusion, the micro-nano-hybrid titanium surfaces may slow the rate of time-dependent degradation of titanium

Direct writing of microtunnels using proton beam micromachining

International Nuclear Information System (INIS)

Marot, Laurent; Munnik, Frans; Mikhailov, Serguei

2006-01-01

The production of high aspect ratio microstructures is a potential growth area. The combination of deep X-ray lithography with electroforming and micromolding (i.e. LIGA) is one of the main techniques used to produce 3D microstructures. The new technique of proton micromachining employs focused MeV protons in a direct write process which is complementary to LIGA. During ion exposure of positive photoresist like PMMA, scission of molecular chains occurs. These degraded polymer chains are removed by the developer. The aim of this paper is to investigate the capabilities of proton micromachining as a lithographic technique. We show the realization of sub-surface channels, or microtunnels, which have been fabricated in only one exposure and without cutting or resurfacing the material. Using our Van-de-Graaff accelerator, the resist (PMMA) has been exposed with high-energy protons (2.5 MeV). The range of charged particles in matter is well-defined and depends on the energy. Therefore, it is possible to obtain a dose which is sufficient to develop the bottom part of the ion paths but not the top part. Thus, by selecting the energy and the exposure time, a big variety of microtunnels can be realized

Monitoring of slope-instabilities and deformations with Micro-Electro-Mechanical-Systems (MEMS) in wireless ad-hoc Sensor Networks

Science.gov (United States)

Arnhardt, C.; Fernández-Steeger, T. M.; Azzam, R.

2009-04-01

In most mountainous regions, landslides represent a major threat to human life, properties and infrastructures. Nowadays existing landslide monitoring systems are often characterized by high efforts in terms of purchase, installation, maintenance, manpower and material. In addition (or because of this) only small areas or selective points of the endangered zone can be observed by the system. Therefore the improvement of existing and the development of new monitoring and warning systems are of high relevance. The joint project "Sensor based Landslide Early Warning Systems" (SLEWS) deals with the development of a prototypic Alarm- and Early Warning system (EWS) for different types of landslides using low-cost micro-sensors (MEMS) integrated in a wireless sensor network (WSN). Modern so called Ad-Hoc, Multi-Hop wireless sensor networks (WSN) are characterized by a self organizing and self-healing capacity of the system (autonomous systems). The network consists of numerous individual and own energy-supply operating sensor nodes, that can send data packages from their measuring devices (here: MEMS) over other nodes (Multi-Hop) to a collection point (gateway). The gateway provides the interface to central processing and data retrieval units (PC, Laptop or server) outside the network. In order to detect and monitor the different landslide processes (like fall, topple, spreading or sliding) 3D MEMS capacitive sensors made from single silicon crystals and glass were chosen to measure acceleration, tilting and altitude changes. Based on the so called MEMS (Micro-Electro-Mechanical Systems) technology, the sensors combine very small mechanical and electronic units, sensing elements and transducers on a small microchip. The mass production of such type of sensors allows low cost applications in different areas (like automobile industries, medicine, and automation technology). Apart from the small and so space saving size and the low costs another advantage is the energy

A New Servo Control Drive for Electro Discharge Texturing System Industrial Applications Using Ultrasonic Technology

Directory of Open Access Journals (Sweden)

M. Shafik

2013-07-01

Full Text Available This paper presents a new ultrasonic servo control drive for electro discharge texturing system industrial applications. The new drive is aiming to overcome the current teething issues of the existing electro discharge texturing system, servo control drive level of precision, processing stability, dynamic response and surface profile of the machined products. The new ultrasonic servo control drive consists of three main apparatuses, an ultrasonic motor, electronic driver and control unit. The ultrasonic motor consists of three main parts, the stator, rotor and sliding element. The motor design process, basic configuration, principles of motion, finite element analysis and experimental examination of the main characteristics is discussed in this paper. The electronic driver of the motor consists of two main stages which are the booster and piezoelectric amplifier. The experimental test and validation of the developed servo control drive in electro discharge texturing platform is also discussed and presented in this paper. The initial results showed that the ultrasonic servo control drive is able to provide: a bidirectional of motion, a resolution of <50μm and a dynamic response of <10msec. The electron microscopic micro examination into the textured samples showed that: a clear improvement in machining stability, products surface profile, a notable reduction in the processing time, arcing and short-circuiting teething phenomena.

Silicon-micromachined microchannel plates

International Nuclear Information System (INIS)

Beetz, Charles P.; Boerstler, Robert; Steinbeck, John; Lemieux, Bryan; Winn, David R.

2000-01-01

Microchannel plates (MCP) fabricated from standard silicon wafer substrates using a novel silicon micromachining process, together with standard silicon photolithographic process steps, are described. The resulting SiMCP microchannels have dimensions of ∼0.5 to ∼25 μm, with aspect ratios up to 300, and have the dimensional precision and absence of interstitial defects characteristic of photolithographic processing, compatible with positional matching to silicon electronics readouts. The open channel areal fraction and detection efficiency may exceed 90% on plates up to 300 mm in diameter. The resulting silicon substrates can be converted entirely to amorphous quartz (qMCP). The strip resistance and secondary emission are developed by controlled depositions of thin films, at temperatures up to 1200 deg. C, also compatible with high-temperature brazing, and can be essentially hydrogen, water and radionuclide-free. Novel secondary emitters and cesiated photocathodes can be high-temperature deposited or nucleated in the channels or the first strike surface. Results on resistivity, secondary emission and gain are presented

Analog integrated circuit for micro-gyro interface realized by multi-chip service in Japan; Multi chip service ni yoru micro gyro interface shuseki kairo no sekkei to shisaku

Energy Technology Data Exchange (ETDEWEB)

Maenaka, K.; Fujita, T.; Okamoto, K.; Maeda, M. [Himeji Institute of Technology, Hyogo (Japan)

1998-10-01

This paper deals with an analog integrated circuit for micro-machined gyroscopes with capacitive output. The Integrated circuit was fabricated as a part of the first project from the `Micromachining Multi-Chip Service Cooperative Re-search Committee` organized by The Institute of Electrical Engineers Japan. This multi-chip service project offers a master slice chip with an equivalent of 9 blocks of operational amplifier circuits. Our integrated circuit includes a modulator, demodulator and synchronous rectifier for detecting small changes in the capacitance of a silicon gyroscope. In the paper, the experimental results of fabricated samples will be described. 13 refs., 15 figs.

System Topology Optimization - An Approach to System Design of Electro-Hydraulic-Mechanical Systems

DEFF Research Database (Denmark)