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Sample records for rf discharge plasmas

  1. On the distribution of plasma parameters in RF glow discharge

    International Nuclear Information System (INIS)

    Ning Cheng; Liu Zuli; Liu Donghui; Han Caiyuan.

    1993-01-01

    A self-consistent numerical model based on the two-fluid equations for describing the transport of charged particles in the RF glow discharge is presented. For a plasma generator filled with low-pressure air and parallel-plate electrodes, the model is numerical solved. The space-time distribution of parameters and the spatial distribution of some time-averaged parameters in plasma, which show the physical picture of the RF glow discharge, are obtained

  2. Plasma diagnosis of RF discharge by using impedance measurement

    International Nuclear Information System (INIS)

    Huang Jianjun; Teuner, D.

    2001-01-01

    It is presented that the method known from network analysis with home-made probe and experimental setup to measure current, voltage and phase angle of RF discharge in He gas more accurately. The sheath thickness and the real and imaginary parts of the plasma impedance were obtained by using the equivalent circuit model and taking account stray capacitances of the set-up. In addition, making use of Godyak's RF discharge simple model, the electron density in the discharge was calculated at different pressure and current density

  3. Investigation of the helicon discharge plasma parameters in a hybrid RF plasma system

    International Nuclear Information System (INIS)

    Aleksandrov, A. F.; Petrov, A. K.; Vavilin, K. V.; Kralkina, E. A.; Neklyudova, P. A.; Nikonov, A. M.; Pavlov, V. B.; Ayrapetov, A. A.; Odinokov, V. V.; Sologub, V. A.; Pavlov, G. Ya.

    2016-01-01

    Results of an experimental study of the helicon discharge plasma parameters in a prototype of a hybrid RF plasma system equipped with a solenoidal antenna are described. It is shown that an increase in the external magnetic field leads to the formation of a plasma column and a shift of the maximum ion current along the discharge axis toward the bottom flange of the system. The shape of the plasma column can be controlled via varying the configuration of the magnetic field.

  4. Investigation of the helicon discharge plasma parameters in a hybrid RF plasma system

    Energy Technology Data Exchange (ETDEWEB)

    Aleksandrov, A. F.; Petrov, A. K., E-mail: alpetrov57@gmail.com; Vavilin, K. V.; Kralkina, E. A.; Neklyudova, P. A.; Nikonov, A. M.; Pavlov, V. B. [Moscow State University, Faculty of Physics (Russian Federation); Ayrapetov, A. A.; Odinokov, V. V.; Sologub, V. A.; Pavlov, G. Ya. [Research Institute of Precision Engineering (Russian Federation)

    2016-03-15

    Results of an experimental study of the helicon discharge plasma parameters in a prototype of a hybrid RF plasma system equipped with a solenoidal antenna are described. It is shown that an increase in the external magnetic field leads to the formation of a plasma column and a shift of the maximum ion current along the discharge axis toward the bottom flange of the system. The shape of the plasma column can be controlled via varying the configuration of the magnetic field.

  5. Gas and plasma dynamics of RF discharge jet of low pressure in a vacuum chamber with flat electrodes and inside tube, influence of RF discharge on the steel surface parameters

    Science.gov (United States)

    Khristoliubova, V. I.; Kashapov, N. F.; Shaekhov, M. F.

    2016-06-01

    Researches results of the characteristics of the RF discharge jet of low pressure and the discharge influence on the surface modification of high speed and structural steels are introduced in the article. Gas dynamics, power and energy parameters of the RF low pressure discharge flow in the discharge chamber and the electrode gap are studied in the presence of the materials. Plasma flow rate, discharge power, the concentration of electrons, the density of RF power, the ion current density, and the energy of the ions bombarding the surface materials are considered for the definition of basic properties crucial for the process of surface modification of materials as they were put in the plasma jet. The influence of the workpiece and effect of products complex configuration on the RF discharge jet of low pressure is defined. The correlation of the input parameters of the plasma unit on the characteristics of the discharge is established.

  6. Ion irradiation effects on ionic liquids interfaced with rf discharge plasmas

    International Nuclear Information System (INIS)

    Baba, K.; Kaneko, T.; Hatakeyama, R.

    2007-01-01

    The availability of plasma ion irradiation toward a gas-liquid interface is investigated in a rf discharge system incorporating an ionic liquid. The introduction of the ionic liquid to the plasma causes the formation of a sheath electric field on the ionic liquid surface, resulting in the acceleration of the ions to the ionic liquid and the generation of secondary electrons from the ionic liquid by the ion irradiation. These effects are found to advance the discharge process and enhance the plasma production

  7. Simulation of spatially dependent excitation rates and power deposition in RF discharges for plasma processing

    International Nuclear Information System (INIS)

    Kushner, M.J.; Anderson, H.M.; Hargis, P.J.

    1985-01-01

    In low pressure, radio frequency (RF) discharges of the type used in plasma processing of semiconductor materials, the rate of electron impact excitation and energy transfer processes depends upon both the phase of the RF excitation and position in the discharge. Electron impact collisions create radicals that diffuse or drift to the surfaces of interest where they are adsorbed or otherwise react. To the extent that these radicals have a finite lifetime, their transport time from point of creation to surface of interest is an important parameter. The spatial dependence of the rate of the initial electron impact collisions is therefore also an important parameter. The power that sustains the discharge is coupled into the system by two mechanisms: a high energy e-beam component of the electron distribution resulting from electrons falling through or being accelerated by the sheaths, and by joule heating in the body of the plasma. In this paper, the authors discuss the spatial dependence of excitation rates and the method of power deposition iin RF discharges of the type used for plasma processing

  8. Application of capacitively coupled rf discharge plasma for sterilization of polymer materials used in ophthalmology

    International Nuclear Information System (INIS)

    Abdullin, I.Sh.; Avetisov, S.E.; Lipatov, D.V.; Rybakova, E.G.; Bragin, V.E.; Bykanov, A.N.; Kamarentsev, E.N.

    1996-01-01

    The sterilization effect of capacitively coupled rf discharge plasma treatment of contact lenses was investigated. There were used two types of polymer: highly hydrophilic polymer with water content 76% (Navelen-76) and poly-methylmethacrylate (PMMA). There was demonstrated the possibility of effective sterilization by RF discharge plasma of a set of polymer materials used in ophthalmology. The best results were obtained for hard contact lenses. There was perfect sterilization in this case. There were not perfect sterilization in some cases of soft contact lenses treatment. It may be caused by porous structure of the external layers of this material and limited thickness of the sterilization layer. (author)

  9. Oxygen functionalization of MWCNTs in RF-dielectric barrier discharge Ar/O2 plasma

    Science.gov (United States)

    Abdel-Fattah, E.; Ogawa, D.; Nakamura, K.

    2017-07-01

    The oxygenation of multi-wall carbon nanotubes (MWCNTs) was performed via a radio frequency dielectric barrier discharge (RF-DBD) in an Ar/{{\\text{H}}2}\\text{O} plasma mixture. The relative intensity of the Ar/{{\\text{O}}2} plasma species was characterized by optical emission spectroscopy (OES). The effects of treatment time, RF power and oxygen gas percentage on the chemical composition and surface morphology of MWCNTs were investigated by means of x-ray photoelectron spectroscopy (XPS), Fourier transform infrared spectroscopy (FTIR), Raman spectroscopy and field emission scanning electron microscopy (FE-SEM). The results of FTIR and XPS revealed the presence of oxygen-containing functional groups on the MWCNTs treated in an Ar/{{\\text{O}}2} plasma at an RF power of 50 W and pressure of 400 Pa. The amount of oxygen functional groups (C=O, C-O, and O-COO) also increased by increasing treatment time up to 6 min, but slightly decreased when treatment time was increased by 10 min. The increase of oxygen gas percentage in the plasma mixture does not affect the oxygen content in the treated MWCNTs. Meanwhile, MWCNTs treated at high power (80 W) showed a reduction in oxygen functional groups in comparison with low RF power conditions. The Raman analysis was consistent with the XPS and FTIR results. The integrity of the nanotube patterns also remained damaged as observed by FE-SEM images. The MWCNTs treated in RF-DBD using the Ar/{{\\text{O}}2} plasma mixture showed improved dispersibility in deionized water. A correlation between the OES data and the observed surface characterization for an improved understanding of the functionalization of MWCNTs in Ar/{{\\text{O}}2} plasma was presented.

  10. RF torch discharge combined with conventional burner

    International Nuclear Information System (INIS)

    Janca, J.; Tesar, C.

    1996-01-01

    The design of the combined flame-rf-plasma reactor and experimental examination of this reactor are presented. For the determination of the temperature in different parts of the combined burner plasma the methods of emission spectroscopy were used. The temperatures measured in the conventional burner reach the maximum temperature 1900 K but in the burner with the superimposed rf discharge the neutral gas temperature substantially increased up to 2600 K but also the plasma volume increases substantially. Consequently, the resident time of reactants in the reaction zone increases

  11. Investigations of electropositive and electronegative RF discharges

    International Nuclear Information System (INIS)

    Bryant, P.M.

    2000-01-01

    Electronegative RF discharges are extensively used in the semi-conductor industry for material processing. Despite this the subject of electronegative RF discharges has been largely neglected. The aim of this thesis is to investigate a RF oxygen discharge by mass/energy spectrometry, a retarding field analyser and an actively compensated Langmuir probe. Measurements are also obtained in argon for comparison. In this thesis pure oxygen will be used as this has relatively simple discharge chemistry with most of the rate constants well known. Ion energy analysis (Chapter 3) show the discharge to contract into the centre of the chamber at low pressures in both gases. The expected thinner peak of the oxygen ion energy distribution was not observed, this is shown to be due to RF modulation of the positive ions with collisions playing a role. The dominant positive ion in the discharge bulk and colliding in the sheath in oxygen was found to be O 2 + with less than 10% O + over the range of pressure investigated (Chapter 4). Various minor ions such as O 3 + and O 4 + were also observed. By actively compensating a Langmuir probe for the first three plasma harmonics it is shown that it is unnecessary to compensate when the amplitude of a given harmonic is comparable to the electron temperature (Chapter 5). A study of Langmuir probe measurements in argon (Chapter 7) has shown that the use of the collisionless Alien, Boyd and Reynolds theory leads to discrepancies in the measured electron densities. The correct density can be obtained by using the perturbation method of Shih and Levi, this corrects for ion-neutral collisions in electropositive plasmas only. This theory is extended to electronegative plasmas (Chapter 6) so that measurements of the negative ion density obtained from the collisionless theory of Arnemiya, Annaratone and Alien can be corrected. Langmuir probe measurements in oxygen indicate a peak in the negative ion density at around 3Pa and are found to be in good

  12. Diagnostic study of multiple double layer formation in expanding RF plasma

    Science.gov (United States)

    Chakraborty, Shamik; Paul, Manash Kumar; Roy, Jitendra Nath; Nath, Aparna

    2018-03-01

    Intensely luminous double layers develop and then expand in size in a visibly glowing RF discharge produced using a plasma source consisting of a semi-transparent cylindrical mesh with a central electrode, in a linear plasma chamber. Although RF discharge is known to be independent of device geometry in the absence of magnetic field, the initiation of RF discharge using such a plasma source results in electron drift and further expansion of the plasma in the vessel. The dynamics of complex plasma structures are studied through electric probe diagnostics in the expanding RF plasma. The measurements made to study the parametric dependence of evolution of double layer structures are analyzed and presented here. The plasma parameter measurements suggest that the complex potential structures initially form with low potential difference between the layers and then gradually expand producing burst oscillations. The present study provides interesting information about the stability of plasma sheath and charge particle dynamics in it that are important to understand the underlying basic sheath physics along with applications in plasma acceleration and propulsion.

  13. Multi-step capacitor discharges as an RF generator

    International Nuclear Information System (INIS)

    Hotta, Eiki; Yamamoto, Shunji; Ishii, Shozo; Hayashi, Izumi

    1979-01-01

    A variety of methods have been developed for large output radio frequency (RF) generators to heat and stabilize high temperature plasma. As the generators for this purpose, capacitor discharge, cable discharge, and oscillation with electronic tubes are considered. Here, a new RF generator is reported, which utilizes capacitor discharge to extract heavy current, and solves the difficulty of short duration by employing multistep discharges. The authors solved the problem of frequency decrease in capacitor discharge by cutting off the unnecessary capacitors reasonably from the load circuit, using the additional circuit for shunting current and vacuum gap switches. The vacuum gap switches and the trigger system are described together with the RF generator manufactured. The generator was fabricated to be rather compact for its large output and simple in circuitry as compared with conventional oscillator systems. The shortcomings are frequency variation and the improper phase of switching the next step in to cause instability, when the load change occurs. It would be difficult to operate the generator in a RF range of more than about 10 MHz due to jitter of the vacuum gap switches and others. (Wakatsuki, Y.)

  14. RF power absorption by plasma of low pressure low power inductive discharge located in the external magnetic field

    Science.gov (United States)

    Kralkina, E. A.; Rukhadze, A. A.; Nekliudova, P. A.; Pavlov, V. B.; Petrov, A. K.; Vavilin, K. V.

    2018-03-01

    Present paper is aimed to reveal experimentally and theoretically the influence of magnetic field strength, antenna shape, pressure, operating frequency and geometrical size of plasma sources on the ability of plasma to absorb the RF power characterized by the equivalent plasma resistance for the case of low pressure RF inductive discharge located in the external magnetic field. The distinguishing feature of the present paper is the consideration of the antennas that generate not only current but charge on the external surface of plasma sources. It is shown that in the limited plasma source two linked waves can be excited. In case of antennas generating only azimuthal current the waves can be attributed as helicon and TG waves. In the case of an antenna with the longitudinal current there is a surface charge on the side surface of the plasma source, which gives rise to a significant increase of the longitudinal and radial components of the RF electric field as compared with the case of the azimuthal antenna current.

  15. Lage-area planar RF plasma productions by surface waves

    International Nuclear Information System (INIS)

    Nonaka, S.

    1994-01-01

    Large-area rf plasmas are confirmed to be produced by means of RF discharges inside a large-area dielectric tube. The plasma space is 73 cm x 176 cm and 2.5 cm. The plasma is thought to be produced by an odd plasma-surface wave (PSW ο ) in case of using large-area electrodes and by an even plasma-surface wave (PSW ο ) in case of without the electrodes. (author). 7 refs, 4 figs

  16. Plasma edge cooling during RF heating

    International Nuclear Information System (INIS)

    Suckewer, S.; Hawryluk, R.J.

    1978-01-01

    A new approach to prevent the influx of high-Z impurities into the core of a tokamak discharge by using RF power to modify the edge plasma temperature profile is presented. This concept is based on spectroscopic measurements on PLT during ohmic heating and ATC during RF heating. A one dimensional impurity transport model is used to interpret the ATC results

  17. Time effectiveness of capillary effect improvement of ramie fabrics processed by RF glow discharging

    International Nuclear Information System (INIS)

    Wang Zhiwen; Wei Weixing; He Yanhe; Zhao Yuanqing; Pan Liyiji; Li Xuemei; Shi Shaodui; Li Guangxin

    2010-01-01

    The time effectiveness of capillary effect improvement of ramie fabrics processed by RF glow discharging was studied. The ramie fabrics were processed in fulfilling with different gas (O 2 , N 2 , Ar) by different parameters (such as pressure,power and time) plasma. The capillary effect of the ramie fabrics processed by RF glow discharging was tested at different time. The results indicate that the capillary effect of ramie fabrics processed by RF glow discharging has been improved, the improvement of the capillary effect firstly decrease rapidly, then slowly, and become stable after 15 day, it indicate that improvement of the ramie fabrics capillary has good time effectiveness, and the plasma parameter for the best capillary effect improvement of ramie fabric is 100 W and 40 Pa processed 20 min by oxygen plasma. (authors)

  18. Redefinition of the self-bias voltage in a dielectrically shielded thin sheath RF discharge

    Science.gov (United States)

    Ho, Teck Seng; Charles, Christine; Boswell, Rod

    2018-05-01

    In a geometrically asymmetric capacitively coupled discharge where the powered electrode is shielded from the plasma by a layer of dielectric material, the self-bias manifests as a nonuniform negative charging in the dielectric rather than on the blocking capacitor. In the thin sheath regime where the ion transit time across the powered sheath is on the order of or less than the Radiofrequency (RF) period, the plasma potential is observed to respond asymmetrically to extraneous impedances in the RF circuit. Consequently, the RF waveform on the plasma-facing surface of the dielectric is unknown, and the behaviour of the powered sheath is not easily predictable. Sheath circuit models become inadequate for describing this class of discharges, and a comprehensive fluid, electrical, and plasma numerical model is employed to accurately quantify this behaviour. The traditional definition of the self-bias voltage as the mean of the RF waveform is shown to be erroneous in this regime. Instead, using the maxima of the RF waveform provides a more rigorous definition given its correlation with the ion dynamics in the powered sheath. This is supported by a RF circuit model derived from the computational fluid dynamics and plasma simulations.

  19. Plasma flow around and charge distribution of a dust cluster in a rf discharge

    Science.gov (United States)

    Schleede, J.; Lewerentz, L.; Bronold, F. X.; Schneider, R.; Fehske, H.

    2018-04-01

    We employ a particle-in-cell Monte Carlo collision/particle-particle particle-mesh simulation to study the plasma flow around and the charge distribution of a three-dimensional dust cluster in the sheath of a low-pressure rf argon discharge. The geometry of the cluster and its position in the sheath are fixed to the experimental values, prohibiting a mechanical response of the cluster. Electrically, however, the cluster and the plasma environment, mimicking also the experimental situation, are coupled self-consistently. We find a broad distribution of the charges collected by the grains. The ion flux shows on the scale of the Debye length strong focusing and shadowing inside and outside the cluster due to the attraction of the ions to the negatively charged grains, whereas the electron flux is characterized on this scale only by a weak spatial modulation of its magnitude depending on the rf phase. On the scale of the individual dust potentials, however, the electron flux deviates in the vicinity of the cluster strongly from the laminar flow associated with the plasma sheath. It develops convection patterns to compensate for the depletion of electrons inside the dust cluster.

  20. Review of laser-induced fluorescence methods for measuring rf- and microwave electric fields in discharges

    International Nuclear Information System (INIS)

    Gavrilenko, V.; Oks, E.

    1994-01-01

    Development of methods for measuring rf- or μ-wave electric fields E(t) = E 0 cosωt in discharge plasmas is of a great practical importance. First, these are fields used for producing rf- or μ-wave discharges. Second, the fields E(t) may represent electromagnetic waves penetrating into a plasma from the outside. This paper reviews methods for diagnostics of the fields E(t) in low temperature plasmas based on Laser-Induced Fluorescence (LIF). Compared to emission (passive) methods, LIF-methods have a higher sensitivity as well as higher spatial and temporal resolutions. Underlying physical effects may be highlighted by an example of LIF of hydrogen atoms in a plasma. After a presentation of the underlying physical principles, the review focuses on key experiments where these principles were implemented for measurements of rf- and μ-wave electric fields in various discharges

  1. Analysis of radiofrequency discharges in plasma

    Science.gov (United States)

    Kumar, D.; McGlynn, S.P.

    1992-08-04

    Separation of laser optogalvanic signals in plasma into two components: (1) an ionization rate change component, and (2) a photoacoustic mediated component. This separation of components may be performed even when the two components overlap in time, by measuring time-resolved laser optogalvanic signals in an rf discharge plasma as the rf frequency is varied near the electrical resonance peak of the plasma and associated driving/detecting circuits. A novel spectrometer may be constructed to make these measurements. Such a spectrometer would be useful in better understanding and controlling such processes as plasma etching and plasma deposition. 15 figs.

  2. A new equilibrium theory for rf discharges

    Science.gov (United States)

    Chen, Francis F.; Curreli, Davide

    2011-10-01

    Two problems often encountered in RF discharges are 1) anomalous skin depth and 2) anomalous electron diffusion across magnetic fields B. Both effects can be explained if the discharges are not unusually long or short. The Simon short-circuit effect then allows the electrons to follow the Boltzmann relation even across B. Once Maxwellian electrons are assumed, a remarkable result can be obtained for radial profiles of density, potential, and ion drift velocity toward the cylindrical wall. In suitably normalized units, these profiles take on a universal shape for all discharges, regardless of B. The velocity profile naturally reaches the Bohm velocity at the wall (= sheath edge). Our code EQM solves for the radial profiles of plasma and neutral density including neutral depletion. All radial dependences are taken into account exactly, and no assumption of a presheath is necessary. To get the profile of Te requires energy balance in the specific discharge. We have done this for helicon discharges described by the HELIC code. Iteration between EQM and HELIC yields all profiles and also the absolute density for given RF power. Now at Univ. of Padua, Padua, Italy.

  3. The discharge characteristics in nitrogen helicon plasma

    Science.gov (United States)

    Zhao, Gao; Wang, Huihui; Si, Xinlu; Ouyang, Jiting; Chen, Qiang; Tan, Chang

    2017-12-01

    Discharge characteristics of helicon plasma in nitrogen and argon-nitrogen mixtures were investigated experimentally by using a Langmuir probe, a B-dot probe, and an optical emission spectrum. Helicon wave discharge is confirmed by the changes of electron density and electromagnetic signal amplitude with the increasing RF power, which shows three discharge stages in nitrogen, corresponding to E-mode, H-mode, and W-mode discharges in helicon plasma, respectively. Discharge images in the radial cross section at different discharge modes through an intensified charge coupled device (ICCD) show a rapid increase in luminous intensity along with the RF power. When the nitrogen discharge is in the W-mode, the images show that the strongest luminance locates near the plasma boundary and no blue core appears in the axial center of tube, which is always observed in argon W-mode discharge. The "big blue" or blue core is a special character in helicon plasma, but it has not been observed in nitrogen helicon plasma. In nitrogen-argon mixtures, a weak blue core is observed in ICCD images since the nitrogen content is increased. The electric field turns to the periphery in the distribution of the radial field and the electron temperature decreases with the increasing nitrogen content, especially when the blue core disappears. The different behaviors of the electron impact and the energy consumption in nitrogen helicon plasma are suggested to be responsible for the decrease in electron energy and the change in the electric field distribution.

  4. Plasma rotation and rf heating in DIII-D

    International Nuclear Information System (INIS)

    DeGrassie, J.S.; Baker, D.R.; Burrell, K.H.

    1999-05-01

    In a variety of discharge conditions on DIII-D it is observed that rf electron heating reduces the toroidal rotation speed and core ion temperature. The rf heating can be with either fast wave or electron cyclotron heating and this effect is insensitive to the details of the launched toroidal wavenumber spectrum. To date all target discharges have rotation first established with co-directed neutral beam injection. A possible cause is enhanced ion momentum and thermal diffusivity due to electron heating effectively creating greater anomalous viscosity. Another is that a counter directed toroidal force is applied to the bulk plasma via rf driven radial current

  5. Plasma rotation and rf heating in DIII-D

    International Nuclear Information System (INIS)

    Grassie, J. S. de; Baker, D. R.; Burrell, K. H.; Greenfield, C. M.; Lin-Liu, Y. R.; Luce, T. C.; Petty, C. C.; Prater, R.; Heidbrink, W. W.; Rice, B. W.

    1999-01-01

    In a variety of discharge conditions on DIII-D it is observed that rf electron heating reduces the toroidal rotation speed and core ion temperature. The rf heating can be with either fast wave or electron cyclotron heating and this effect is insensitive to the details of the launched toroidal wavenumber spectrum. To date all target discharges have rotation first established with co-directed neutral beam injection. A possible cause is enhanced ion momentum and thermal diffusivity due to electron heating effectively creating greater anomalous viscosity. Another is that a counter directed toroidal force is applied to the bulk plasma via rf driven radial current. (c) 1999 American Institute of Physics

  6. Pressure dependence of electron temperature using rf-floated electrostatic probes in rf plasmas

    International Nuclear Information System (INIS)

    Cantin, A.; Gagne, R.R.J.

    1977-01-01

    A new technique, which eliminates ac between probe and plasma by means of a ''follower'', permits electrostatic probes to be used in rf plasmas with a degree of confidence and accuracy which is equal, if not better, to that for a dc discharge. Measurements in argon, using this technique, have shown that electron temperature (T/sub e/) in an rf discharge is not higher than in dc discharge. Moreover the values of T/sub e/ do not agree with von Engel's law, but are in close agreement with a theory based on free diffusion and extrapolated up to values of pR=20 Torr cm (pressure times tube radius). These results are in contradiction with published electrostatic probe results for a positive column, but agree with published results as determined by microwave radiometry and optical spectroscopy. The hypothesis is made that the supporting evidence in favor of von Engel's law, afforded by published electrostatic probe results, could be due to an artifact

  7. Modelling of an RF plasma shower

    NARCIS (Netherlands)

    Atanasova, M.; Carbone, E.A.D.; Mihailova, D.B.; Benova, E.; Degrez, G.; Mullen, van der J.J.A.M.

    2012-01-01

    A capacitive radiofrequency (RF) discharge at atmospheric pressure is studied by means of a time-dependent, two-dimensional fluid model. The plasma is created in a stationary argon gas flow guided through two perforated electrodes, hence resembling a shower. The inner electrode, the electrode facing

  8. Modelling of pulsed RF corona discharges in high-pressure air

    International Nuclear Information System (INIS)

    Auzas, F; Makarov, M; Naidis, G V

    2012-01-01

    An approach to description of pulsed RF corona discharges in high-pressure air is developed, based on the model of a filamentary discharge sustained by an electromagnetic wave guided along the plasma filament. Results of numerical simulation of spatial-temporal discharge dynamics at the quasi-stationary stage are obtained for various values of gas pressure and wave frequency. Experimental data on the discharge length versus the power absorbed by the discharge are presented. Their comparison with simulation results is given. (paper)

  9. Investigation of RF-enhanced plasma potentials on Alcator C-Mod

    International Nuclear Information System (INIS)

    Ochoukov, R.; Whyte, D.G.; Brunner, D.; Cziegler, I.; LaBombard, B.; Lipschultz, B.; Myra, J.; Terry, J.; Wukitch, S.

    2013-01-01

    Radio frequency (RF) sheath rectification is a leading mechanism suspected of causing anomalously high erosion of plasma facing materials in RF-heated plasmas on Alcator C-Mod. An extensive experimental survey of the plasma potential (Φ P ) in RF-heated discharges on C-Mod reveals that significant Φ P enhancement (>100 V) is found on outboard limiter surfaces, both mapped and not mapped to active RF antennas. Surfaces that magnetically map to active RF antennas show Φ P enhancement that is, in part, consistent with the recently proposed slow wave rectification mechanism. Surfaces that do not map to active RF antennas also experience significant Φ P enhancement, which strongly correlates with the local fast wave intensity. In this case, fast wave rectification is a leading candidate mechanism responsible for the observed enhancement

  10. Investigation of RF-enhanced plasma potentials on Alcator C-Mod

    Energy Technology Data Exchange (ETDEWEB)

    Ochoukov, R., E-mail: ochoukov@psfc.mit.edu [PSFC MIT, NW17, 175 Albany Street, Cambridge, MA 02139 (United States); Whyte, D.G.; Brunner, D. [PSFC MIT, NW17, 175 Albany Street, Cambridge, MA 02139 (United States); Cziegler, I. [Center for Energy Research, UCSD, 9500 Gilman Drive, La Jolla, CA 92093 (United States); LaBombard, B.; Lipschultz, B. [PSFC MIT, NW17, 175 Albany Street, Cambridge, MA 02139 (United States); Myra, J. [Lodestar Research Corporation, 2400 Central Avenue P-5, Boulder, CO 80301 (United States); Terry, J.; Wukitch, S. [PSFC MIT, NW17, 175 Albany Street, Cambridge, MA 02139 (United States)

    2013-07-15

    Radio frequency (RF) sheath rectification is a leading mechanism suspected of causing anomalously high erosion of plasma facing materials in RF-heated plasmas on Alcator C-Mod. An extensive experimental survey of the plasma potential (Φ{sub P}) in RF-heated discharges on C-Mod reveals that significant Φ{sub P} enhancement (>100 V) is found on outboard limiter surfaces, both mapped and not mapped to active RF antennas. Surfaces that magnetically map to active RF antennas show Φ{sub P} enhancement that is, in part, consistent with the recently proposed slow wave rectification mechanism. Surfaces that do not map to active RF antennas also experience significant Φ{sub P} enhancement, which strongly correlates with the local fast wave intensity. In this case, fast wave rectification is a leading candidate mechanism responsible for the observed enhancement.

  11. Analytic analysis on asymmetrical micro arcing in high plasma potential RF plasma systems

    International Nuclear Information System (INIS)

    Yin, Y; McKenzie, D R; Bilek, M M M

    2006-01-01

    We report experimental and analytical results on asymmetrical micro arcing in a RF (radio frequency) plasma. Micro arcing, resulting from high plasma potential, in RF plasma was found to occur only on the grounded electrode for a variety of electrode and surface configurations. The analytic derivation was based on a simple RF time-dependent Child-Langmuir sheath model and electric current continuity. We found that the minimum potential difference in one RF period across the grounded electrode sheath depends on the area ratio of the grounded electrode to the powered electrode. As the area ratio increases, the minimum potential difference across a sheath increases for the grounded electrode but not for the RF powered electrode. We showed that discharge time in micro arcing is more than 100 RF periods; thus the presence of a continuous high electric field in one RF cycle results in micro arcing on the grounded electrode. However, the minimum potential difference in one RF period across the powered electrode sheath is always small so that it prevents micro arcing occurring even though the average sheath voltage can be large. This simple analytic model is consistent with particle-in-cell simulation results

  12. Plasma properties of RF magnetron sputtering system using Zn target

    Energy Technology Data Exchange (ETDEWEB)

    Nafarizal, N.; Andreas Albert, A. R.; Sharifah Amirah, A. S.; Salwa, O.; Riyaz Ahmad, M. A. [Microelectronic and Nanotechnology - Shamsuddin Research Centre (MiNT-SRC), Faculty of Electrical and Electronic Engineering, Universiti Tun Hussein Onn Malaysia 86400 Parit Raja, Batu Pahat, Johor (Malaysia)

    2012-06-29

    In the present work, we investigate the fundamental properties of magnetron sputtering plasma using Zn target and its deposited Zn thin film. The magnetron sputtering plasma was produced using radio frequency (RF) power supply and Argon (Ar) as ambient gas. A Langmuir probe was used to collect the current from the plasma and from the current intensity, we calculate the electron density and electron temperature. The properties of Zn sputtering plasma at various discharge conditions were studied. At the RF power ranging from 20 to 100 W and gas pressure 5 mTorr, we found that the electron temperature was almost unchanged between 2-2.5 eV. On the other hand, the electron temperature increased drastically from 6 Multiplication-Sign 10{sup 9} to 1 Multiplication-Sign 10{sup 10}cm{sup -3} when the discharge gas pressure increased from 5 to 10 mTorr. The electron microscope images show that the grain size of Zn thin film increase when the discharge power is increased. This may be due to the enhancement of plasma density and sputtered Zn density.

  13. Dimensionally similar discharges with central rf heating on the DIII-D tokamak

    International Nuclear Information System (INIS)

    Petty, C.C.; Luce, T.C.; Pinsker, R.I.

    1993-04-01

    The scaling of L-mode heat transport with normalized gyroradius is investigated on the DIII-D tokamak using central rf heating. A toroidal field scan of dimensionally similar discharges with central ECH and/or fast wave heating show gyro-Bohm-like scaling both globally and locally. The main difference between these restats and those using NBI heating on DIII-D is that with rf heating the deposition profile is not very sensitive to the plasma density. Therefore central heating can be utilized for both the low-B and high-B discharges, whereas for NBI the power deposition is decidedly off-axis for the high-B discharge (i.e., high density)

  14. The experience with JET's combined dc/Rf glow discharge cleaning (GDC) system

    International Nuclear Information System (INIS)

    Pearce, R.J.H.; Andrew, P.; Bryan, S.

    1996-01-01

    The JET Tokamak was fitted with four new electrodes of novel design, each powered from individual computer controlled dc and RF supplies. Details of enhancements and problems from 15 months experience with the system are outlined. Experiments were performed to assess the effect of RF on the glow discharge characteristics, and to establish stable glow at low pressure and high voltage. JET combined RF/dc glow discharge cleaning (GDC) had no significant advantages over pure dc GDC, provided highly stable dc current control was obtained. In fact, the mechanically weak electrode inductor spiral required to allow RF posed a distinct disadvantage. The electrodes were converted to simple plates, following damage caused by halo currents during Tokamak plasma disruptions. The performance of these electrodes was assessed. Future developments in the JET GDC system are outlined. (Author)

  15. Excitation of RF oscillations in a discharge with negative differential conductivity

    International Nuclear Information System (INIS)

    Antonov, A.N.; Kovpik, O.F.; Kornilov, E.A.

    2001-01-01

    The excitation of oscillations in a discharge with negative differential conductivity is studied experimentally. The possibility is demonstrated of amplifying oscillations in the cathode dark space at frequencies close to the electron plasma frequency of the positive-column plasma. The phase velocities of waves at these frequencies are determined. When the waves pass from the cathode dark space to the discharge positive column, their phase velocities decrease; the closer the frequency is to the electron plasma frequency, the more pronounced the decrease in the phase velocity. As the intensity of oscillations increases, the discharge becomes non-steady-state. This is confirmed by the time evolution of the current-voltage characteristic. The shape of the current-voltage characteristic, its splitting, and the rate at which it varies depend on the input RF power. The decrease in the cathode dark space indicates that the ionization processes in the discharge are strongly influenced by electron plasma oscillations excited due to the collective interaction of the electron beam formed at the cathode with the discharge plasma. It is these processes that determine the maximum values of both the frequency of the excited oscillations and the power that can be withdrawn from the discharge

  16. Mechanism for heating of nitrogen plasmas in an electrodeless rf capacitive discharge at medium pressures

    International Nuclear Information System (INIS)

    Berdichevskii, M.G.; Marusin, V.V.

    1979-01-01

    The possible contributions of several processes to the experimentally observed heating of nitrogen plasmas in an electarodeless rf capacitive discharge at pressures of p=2.7-67 kPa are discussed. These processes are electron-rotational, vibrational--translational (V--T), and nonresonance vibrational--vibrational (V--V) energy exchange and effects due to O 2 , H 2 O, and NO impurities in the gas. It is shown that as the pressure is decreased the heating mechanism changes from quasiequilibrium to nonequilibrium V--T heating caused by overpopulation of high vibrational levels in the ground state of the nitrogen molecule

  17. A calibrated, broadband antenna for plasma RF emission measurements below 1 GHz

    International Nuclear Information System (INIS)

    Spence, P.D.; Rosenberg, D.; Roth, J.R.

    1984-01-01

    A constant impedance, constant aperture antenna can make possible broadband plasma RF emission measurements which yield relative and absolute power levels. However, good technique must be followed for the immersion of such an RF probe into plasma radiation. The authors have used a complementary conical spiral antenna to observe plasma RF emission over the frequency range 100 ≤ν≤ 1200 MHz. The RF emission was emitted by a modified Penning discharge. The RF emission from the discharge typically exhibits harmonic structure over a broad frequency range, necessitating a broadband antenna with a flat frequency response curve to allow detailed spectral analysis. The antenna consists of two metal strips of approximately uniform width wound helically on a cone made of Lexan plastic. Since the antenna is a balanced network, a balun is employed to make the transition to a 50-ohm coaxial line. The antenna feed method is critical in maintaining a uniform impedance network. Neglecting stray transmission line effects, the probe circuit for the frequency range 100 ≤ν≤ 500 MHz is 50 ohms due to the spectrum analyzer, paralleled by 291 ohms due to balun magnetization; the combination is fed by a 144 ohm probe aperture

  18. Battery-Powered RF Pre-Ionization System for the Caltech Magnetohydrodynamically-Driven Jet Experiment: RF Discharge Properties and MHD-Driven Jet Dynamics

    Science.gov (United States)

    Chaplin, Vernon H.

    This thesis describes investigations of two classes of laboratory plasmas with rather different properties: partially ionized low pressure radiofrequency (RF) discharges, and fully ionized high density magnetohydrodynamically (MHD)-driven jets. An RF pre-ionization system was developed to enable neutral gas breakdown at lower pressures and create hotter, faster jets in the Caltech MHD-Driven Jet Experiment. The RF plasma source used a custom pulsed 3 kW 13.56 MHz RF power amplifier that was powered by AA batteries, allowing it to safely float at 4-6 kV with the cathode of the jet experiment. The argon RF discharge equilibrium and transport properties were analyzed, and novel jet dynamics were observed. Although the RF plasma source was conceived as a wave-heated helicon source, scaling measurements and numerical modeling showed that inductive coupling was the dominant energy input mechanism. A one-dimensional time-dependent fluid model was developed to quantitatively explain the expansion of the pre-ionized plasma into the jet experiment chamber. The plasma transitioned from an ionizing phase with depressed neutral emission to a recombining phase with enhanced emission during the course of the experiment, causing fast camera images to be a poor indicator of the density distribution. Under certain conditions, the total visible and infrared brightness and the downstream ion density both increased after the RF power was turned off. The time-dependent emission patterns were used for an indirect measurement of the neutral gas pressure. The low-mass jets formed with the aid of the pre-ionization system were extremely narrow and collimated near the electrodes, with peak density exceeding that of jets created without pre-ionization. The initial neutral gas distribution prior to plasma breakdown was found to be critical in determining the ultimate jet structure. The visible radius of the dense central jet column was several times narrower than the axial current channel

  19. Electromagnetic surface waves for large-area RF plasma productions between large-area planar electrodes

    International Nuclear Information System (INIS)

    Nonaka, S.

    1992-01-01

    Recently, large-area plasma production has been tested by means of a 13.56 MHz radio-frequency (RF) discharge between a pair of large-area planar electrodes, approximately 0.5 m x 1.4 m, as one of the semiconductor technologies for fabrication of large-area amorphous silicon solar cells in the ''Sunshine Project'' of the Agency of Industrial Science and Technology in Japan. We also confirmed long plasma production between a pair of long electrodes. In this paper, normal electromagnetic (EM) waves propagating in a region between a planar waveguide with one plasma and two dielectric layers are analyzed in order to study the feasibility of large-area plasma productions by EM wave-discharges between a pair of large-area RF electrodes larger than the half-wavelength of RF wave. In conclusion, plasmas higher than an electron plasma frequency will be produced by an odd TMoo surface mode. (author) 4 refs., 3 figs

  20. The Efficiency of Quartz Particles Evaporation in the Argon Plasma Flow of the RF Inductively Coupled Plasma Torch

    Directory of Open Access Journals (Sweden)

    Yu. M. Grishin

    2017-01-01

    Full Text Available Owing to high-power density and high-purity plasma, a RF inductively coupled plasma torch (ICPT is widely used both in research laboratory and in industry. The potential RF ICPT application areas are powders spheroidisation, waste treatment, thermal spraying, etc.In the last decade the investigation was focused on the treatment processes of quartz into polycrystalline silicon. An analysis of these results has shown that the increasing productivity and producing high-purity silicon can be achieved only when using the electrodeless radio-frequency induction plasma torches and in case the optimum conditions for evaporation of SiO2solid particles are realized.Optimization of the RF ICPT design and power parameters calls for a wide range of computational studies. In spite of the fact that to date a large number of efforts to calculate the evaporation efficiency of powder materials have been made, a number of issues, as applied to the problem of obtaining silicon, require further research.In this paper, we present the results of a two-dimensional numerical simulation of the heating and evaporation of quartz particles in the RF ICPT channel with axial flow of gases. The main aim is to determine how the axial position of the central tube (through which the particles are injected into the discharge zone, the dispersion of the quartz powder, the amplitude of the discharge current (and, respectively, flow regimes impact on the evaporation efficiency of quartz particles.The paper presented the numerical modeling results of heating and evaporation processes of quartz particles supplied by transporting gas to the RF ICPT channel with axial gas flow (argon. Defined the impact of the axial position of the central tube, the plasma flow regime, the discharge current, the flow rate of transporting gas, and other parameters on the evaporation efficiency of quartz particles.It is shown that the evaporation efficiency of particles reaches its maximum when their

  1. Beam--plasma instabilities and the beam--plasma discharge

    International Nuclear Information System (INIS)

    Kellogg, P.J.; Boswell, R.W.

    1986-01-01

    Using a new electron gun, a number of measurements bearing on the generation of beam--plasma discharge (BPD) in WOMBAT (waves on magnetized beams and turbulence) [R. W. Boswell and P. J. Kellogg, Geophys. Res. Lett. 10, 565 (1983)] have been made. A beam--plasma discharge is an rf discharge in which the rf fields are provided by instabilities [W. D. Getty and L. D. Smullin, J. Appl. Phys. 34, 3421 (1963)]. The new gun has a narrower divergence angle than the old, and comparison of the BPD thresholds for the two guns verifies that the BPD ignition current is proportional to the cross-sectional area of the plasma. The high-frequency instabilities, precursors to the BPD, are identified with the two Trivelpiece--Gould modes [A. W. Trivelpiece and R. W. Gould, J. Appl. Phys. 30, 1784 (1959)]. Which frequency appears depends on the neutral pressure. The measured frequencies are not consistent with the simple interpretation of the lower frequency as a Cerenkov resonance with the low-Trivelpiece--Gould mode; it must be a cyclotron resonance. As is generally true in such beam--plasma interaction experiments, strong low-frequency waves appear at currents far below those necessary for BPD ignition. These low-frequency waves are shown to control the onset of the high-frequency precursors to the BPD. A mechanism for this control is suggested, which involves the conversion of a convective instability to an absolute one by trapping of the unstable waves in the density perturbations of the low-frequency waves. This process greatly reduces the current necessary for BPD ignition

  2. Study of ultrasound-assisted radio-frequency plasma discharges in n-dodecane

    Science.gov (United States)

    Camerotto, Elisabeth; De Schepper, Peter; Nikiforov, Anton Y.; Brems, Steven; Shamiryan, Denis; Boullart, Werner; Leys, Christophe; De Gendt, Stefan

    2012-10-01

    This paper investigates the generation of a stable plasma phase in a liquid hydrocarbon (n-dodecane) by means of ultrasound (US) and radio-frequency (RF) or electromagnetic radiation. It is demonstrated for the first time that ultrasonic aided RF plasma discharges can be generated in a liquid. Plasma discharges are obtained for different gas mixtures at a pressure of 12 kPa and at low ignition powers (100 W for RF and 2.4 W cm-2 for US). Direct carbon deposition from the liquid precursor on Cu, Ni, SiO2 and Si substrates has been obtained and no apparent compositional or structural difference among the substrate materials was observed. Characterization of the deposited solid phase revealed an amorphous structure. In addition, structural changes in the liquid precursor after plasma treatment have been analysed. Optical emission spectroscopy (OES) allowed the estimation of several plasma characteristic temperatures. The plasma excitation temperature was estimated to be about 2.3-2.4 eV. The rotational and vibrational temperatures of the discharge in n-dodecane with Ar as a feed gas were 1400 K and 6500 K, respectively. In Ar/O2 plasma, an increased rotational (1630 K) and vibrational temperature (7200 K) were obtained.

  3. Theoretical characterization of electron energy distribution function in RF plasmas

    International Nuclear Information System (INIS)

    Capitelli, M.; Capriati, G.; Dilonardo, M.; Gorse, C.; Longo, S.

    1993-01-01

    Different methods for the modeling of low-temperature plasmas of both technological and fundamental interest are discussed. The main concept of all these models is the electron energy distribution function (eedf) which is necessary to calculate the rate coefficients for any chemical reaction involving electrons. Results of eedf calculations in homogeneous SF 6 and SiH 4 plasmas are discussed based on solution of the time-dependent Boltzmann equation. The space-dependent eedf in an RF discharge in He is calculated taking into account the sheath oscillations by a Monte Carlo model assuming the plasma heating mechanism and the electric field determined by using a fluid model. The need to take into account the ambipolar diffusion of electrons in RF discharge modeling is stressed. A self-consistent model based on coupling the equations of the fluid model and the chemical kinetics ones is presented. (orig.)

  4. The RF voltage dependence of the electron sheath heating in low pressure capacitively coupled rf discharges

    International Nuclear Information System (INIS)

    Buddemeier, U.; Kortshagen, U.; Pukropski, I.

    1995-01-01

    In low pressure capacitively coupled RF discharges two competitive electron heating mechanisms have been discussed for some time now. At low pressures the stochastic sheath heating and for somewhat higher pressures the Joule heating in the bulk plasma have been proposed. When the pressure is increased at constant RF current density a transition from concave electron distribution functions (EDF) with a pronounced cold electron group to convex EDFs with a missing strong population of cold electrons is found. This transition was interpreted as the transition from dominant stochastic to dominant Joule heating. However, a different interpretation has been given by Kaganovich and Tsendin, who attributed the concave shaped EDFs to the spatially inhomogeneous RF field in combination with the nonlocality of the EDF

  5. Study of Pulsed vs. RF Plasma Properties for Surface Processing Applications

    Science.gov (United States)

    Tang, Ricky; Hopkins, Matthew; Barnat, Edward; Miller, Paul

    2015-09-01

    The ability to manipulate the plasma parameters (density, E/N) was previously demonstrated using a double-pulsed column discharge. Experiments extending this to large-surface plasmas of interest to the plasma processing community were conducted. Differences between an audio-frequency pulsed plasma and a radio-frequency (rf) discharge, both prevalent in plasma processing applications, were studied. Optical emission spectroscopy shows higher-intensity emission in the UV/visible range for the pulsed plasma comparing to the rf plasma at comparable powers. Data suggest that the electron energy is higher for the pulsed plasma leading to higher ionization, resulting in increased ion density and ion flux. Diode laser absorption measurements of the concentration of the 1S5 metastable and 1S4 resonance states of argon (correlated with the plasma E/N) provide comparisons between the excitation/ionization states of the two plasmas. Preliminary modeling efforts suggest that the low-frequency polarity switch causes a much more abrupt potential variation to support interesting transport phenomena, generating a ``wave'' of higher temperature electrons leading to more ionization, as well as ``sheath capture'' of a higher density bolus of ions that are then accelerated during polarity switch.

  6. The effect of phase difference between powered electrodes on RF plasmas

    International Nuclear Information System (INIS)

    Proschek, M; Yin, Y; Charles, C; Aanesland, A; McKenzie, D R; Bilek, M M; Boswell, R W

    2005-01-01

    This paper presents the results of measurements carried out on plasmas created in five different RF discharge systems. These systems all have two separately powered RF (13.56 MHz) electrodes, but differ in overall size and in the geometry of both vacuum chambers and RF electrodes or antennae. The two power supplies were synchronized with a phase-shift controller. We investigated the influence of the phase difference between the two RF electrodes on plasma parameters and compared the different system geometries. Single Langmuir probes were used to measure the plasma parameters in a region between the electrodes. Floating potential and ion density were affected by the phase difference and we found a strong influence of the system geometry on the observed phase difference dependence. Both ion density and floating potential curves show asymmetries around maxima and minima. These asymmetries can be explained by a phase dependence of the time evolution of the electrode-wall coupling within an RF-cycle resulting from the asymmetric system geometry

  7. Etching of UO2 in NF3 RF Plasma Glow Discharge

    International Nuclear Information System (INIS)

    John M. Veilleux

    1999-01-01

    A series of room temperature, low pressure (10.8 to 40 Pa), low power (25 to 210 W) RF plasma glow discharge experiments with UO 2 were conducted to demonstrate that plasma treatment is a viable method for decontaminating UO 2 from stainless steel substrates. Experiments were conducted using NF 3 gas to decontaminate depleted uranium dioxide from stainless-steel substrates. Depleted UO 2 samples each containing 129.4 Bq were prepared from 100 microliter solutions of uranyl nitrate hexahydrate solution. The amorphous UO 2 in the samples had a relatively low density of 4.8 gm/cm 3 . Counting of the depleted UO 2 on the substrate following plasma immersion was performed using liquid scintillation counting with alpha/beta discrimination due to the presence of confounding beta emitting daughter products, 234 Th and 234 Pa. The alpha emission peak from each sample was integrated using a gaussian and first order polynomial fit to improve quantification. The uncertainties in the experimental measurement of the etched material were estimated at about ± 2%. Results demonstrated that UO 2 can be completely removed from stainless-steel substrates after several minutes processing at under 200 W. At 180 W and 32.7 Pa gas pressure, over 99% of all UO 2 in the samples was removed in just 17 minutes. The initial etch rate in the experiments ranged from 0.2 to 7.4 microm/min. Etching increased with the plasma absorbed power and feed gas pressure in the range of 10.8 to 40 Pa. A different pressure effect on UO 2 etching was also noted below 50 W in which etching increased up to a maximum pressure, approximately23 Pa, then decreased with further increases in pressure

  8. Effects of rf power on electron density and temperature, neutral temperature, and Te fluctuations in an inductively coupled plasma

    International Nuclear Information System (INIS)

    Camparo, James; Fathi, Gilda

    2009-01-01

    Atomic clocks that fly on global-navigation satellites such as global positioning system (GPS) and Galileo employ light from low-temperature, inductively coupled plasmas (ICPs) for atomic signal generation and detection (i.e., alkali/noble-gas rf-discharge lamps). In this application, the performance of the atomic clock and the capabilities of the navigation system depend sensitively on the stability of the ICP's optical emission. In order to better understand the mechanisms that might lead to instability in these rf-discharge lamps, and hence the satellite atomic clocks, we studied the optical emission from a Rb/Xe ICP as a function of the rf power driving the plasma. Surprisingly, we found that the electron density in the plasma was essentially independent of increases in rf power above its nominal value (i.e., 'rf-power gain') and that the electron temperature was only a slowly varying function of rf-power gain. The primary effect of rf power was to increase the temperature of the neutrals in the plasma, which was manifested by an increase in Rb vapor density. Interestingly, we also found evidence for electron temperature fluctuations (i.e., fluctuations in the plasma's high-energy electron content). The variance of these fluctuations scaled inversely with the plasma's mean electron temperature and was consistent with a simple model that assumed that the total electron density in the discharge was independent of rf power. Taken as a whole, our results indicate that the electrons in alkali/noble-gas ICPs are little affected by slight changes in rf power and that the primary effect of such changes is to heat the plasma's neutral species.

  9. Cryogenic rf test of the first SRF cavity etched in an rf Ar/Cl2 plasma

    Science.gov (United States)

    Upadhyay, J.; Palczewski, A.; Popović, S.; Valente-Feliciano, A.-M.; Im, Do; Phillips, H. L.; Vušković, L.

    2017-12-01

    An apparatus and a method for etching of the inner surfaces of superconducting radio frequency (SRF) accelerator cavities are described. The apparatus is based on the reactive ion etching performed in an Ar/Cl2 cylindrical capacitive discharge with reversed asymmetry. To test the effect of the plasma etching on the cavity rf performance, a 1497 MHz single cell SRF cavity was used. The single cell cavity was mechanically polished and buffer chemically etched and then rf tested at cryogenic temperatures to provide a baseline characterization. The cavity's inner wall was then exposed to the capacitive discharge in a mixture of Argon and Chlorine. The inner wall acted as the grounded electrode, while kept at elevated temperature. The processing was accomplished by axially moving the dc-biased, corrugated inner electrode and the gas flow inlet in a step-wise manner to establish a sequence of longitudinally segmented discharges. The cavity was then tested in a standard vertical test stand at cryogenic temperatures. The rf tests and surface condition results, including the electron field emission elimination, are presented.

  10. Cryogenic rf test of the first SRF cavity etched in an rf Ar/Cl2 plasma

    Directory of Open Access Journals (Sweden)

    J. Upadhyay

    2017-12-01

    Full Text Available An apparatus and a method for etching of the inner surfaces of superconducting radio frequency (SRF accelerator cavities are described. The apparatus is based on the reactive ion etching performed in an Ar/Cl2 cylindrical capacitive discharge with reversed asymmetry. To test the effect of the plasma etching on the cavity rf performance, a 1497 MHz single cell SRF cavity was used. The single cell cavity was mechanically polished and buffer chemically etched and then rf tested at cryogenic temperatures to provide a baseline characterization. The cavity’s inner wall was then exposed to the capacitive discharge in a mixture of Argon and Chlorine. The inner wall acted as the grounded electrode, while kept at elevated temperature. The processing was accomplished by axially moving the dc-biased, corrugated inner electrode and the gas flow inlet in a step-wise manner to establish a sequence of longitudinally segmented discharges. The cavity was then tested in a standard vertical test stand at cryogenic temperatures. The rf tests and surface condition results, including the electron field emission elimination, are presented.

  11. Influence of the RF electrode cleanliness on plasma characteristics and dust-particle generation in methane dusty plasmas

    Science.gov (United States)

    Géraud-Grenier, I.; Desdions, W.; Faubert, F.; Mikikian, M.; Massereau-Guilbaud, V.

    2018-01-01

    The methane decomposition in a planar RF discharge (13.56 MHz) leads both to a dust-particle generation in the plasma bulk and to a coating growth on the electrodes. Growing dust-particles fall onto the grounded electrode when they are too heavy. Thus, at the end of the experiment, the grounded electrode is covered by a coating and by fallen dust-particles. During the dust-particle growth, the negative DC self-bias voltage (VDC) increases because fewer electrons reach the RF electrode, leading to a more resistive plasma and to changes in the plasma chemical composition. In this paper, the cleanliness influence of the RF electrode on the dust-particle growth, on the plasma characteristics and composition is investigated. A cleanliness electrode is an electrode without coating and dust-particles on its surface at the beginning of the experiment.

  12. Concept Study of Radio Frequency (RF Plasma Thruster for Space Propulsion

    Directory of Open Access Journals (Sweden)

    Anna-Maria Theodora ANDREESCU

    2016-12-01

    Full Text Available Electric thrusters are capable of accelerating ions to speeds that are impossible to reach using chemical reaction. Recent advances in plasma-based concepts have led to the identification of electromagnetic (RF generation and acceleration systems as able to provide not only continuous thrust, but also highly controllable and wide-range exhaust velocities. For Future Space Propulsion there is a pressing need for low pressure, high mass flow rate and controlled ion energies. This paper explores the potential of using RF heated plasmas for space propulsion in order to mitigate the electric propulsion problems caused by erosion and gain flexibility in plasma manipulation. The main key components of RF thruster architecture are: a feeding system able to provide the required neutral gas flow, plasma source chamber, antenna/electrodes wrapped around the discharge tube and optimized electromagnetic field coils for plasma confinement. A preliminary analysis of system performance (thrust, specific impulse, efficiency is performed along with future plans of Space Propulsion based on this new concept of plasma mechanism.

  13. Statistical dynamics of transient processes in a gas discharge plasma

    International Nuclear Information System (INIS)

    Smirnov, G.I.; Telegin, G.G.

    1991-01-01

    The properties of a gas discharge plasma to a great extent depend on random processes whose study has recently become particularly important. The present work is concerned with analyzing the statistical phenomena that occur during the prebreakdown stage in a gas discharge. Unlike other studies of breakdown in the discharge gap, in which secondary electron effects and photon processes at the electrodes must be considered, here the authors treat the case of an electrodeless rf discharge or a laser photoresonant plasma. The analysis is based on the balance between the rates of electron generation and recombination in the plasma. The fluctuation kinetics for ionization of atoms in the hot plasma may also play an important role when the electron temperature changes abruptly, as occurs during adiabatic pinching of the plasma or during electron cyclotron heating

  14. Electron energy distribution function control in gas discharge plasmas

    International Nuclear Information System (INIS)

    Godyak, V. A.

    2013-01-01

    The formation of the electron energy distribution function (EEDF) and electron temperature in low temperature gas discharge plasmas is analyzed in frames of local and non-local electron kinetics. It is shown, that contrary to the local case, typical for plasma in uniform electric field, there is the possibility for EEDF modification, at the condition of non-local electron kinetics in strongly non-uniform electric fields. Such conditions “naturally” occur in some self-organized steady state dc and rf discharge plasmas, and they suggest the variety of artificial methods for EEDF modification. EEDF modification and electron temperature control in non-equilibrium conditions occurring naturally and those stimulated by different kinds of plasma disturbances are illustrated with numerous experiments. The necessary conditions for EEDF modification in gas discharge plasmas are formulated

  15. Study of RF-excited Diethylene Glycol Dimethyl Ether Plasmas by Mass Spectrometry

    International Nuclear Information System (INIS)

    Algatti, M A; Mota, R P; Júnior, P W P Moreira; Honda, R Y; Kayama, M E; Kostov, K G

    2012-01-01

    This paper deals with the study of the fragmentation process of diethylene glycol dimethyl ether (CH 3 O(CH 2 CH 2 O) 2 CH 3 ) (diglyme here in) molecule in low pressure RF excited plasma discharges. The study was carried out using mass spectrometry. The results showed that for a fixed pressure, the increase of the RF power coupled to the plasma chamber from 1 to 35 W produced a plasma environment much more reactive which increases the population of the ionized species like CH 2 + (15 amu), C 2 H 4 + (28 amu), CH 3 O + (31 amu), C 2 H 4 O + (44 amu), CH 3 OCH 2 CH 2 + (59 amu) and CH 3 OCH 2 CH 2 O + (75 amu). This fact may be attributed to the increase of the electronic temperature that makes predominant the occurrence of inelastic processes that promotes molecular fragmentation. For a fixed value of RF power the increase of pressure from 50 mTorr to 100 mTorr produces the decreasing of the above mentioned chemical species due the lower electronic mean free path. These results suggest that if one wants to keep the monomer's functionality within the plasma deposited films resulting from such kind of discharges one must operate in low power conditions.

  16. RF Plasma modeling of the Linac4 H− ion source

    CERN Document Server

    Mattei, S; Hatayama, A; Lettry, J; Kawamura, Y; Yasumoto, M; Schmitzer, C

    2013-01-01

    This study focuses on the modelling of the ICP RF-plasma in the Linac4 H− ion source currently being constructed at CERN. A self-consistent model of the plasma dynamics with the RF electromagnetic field has been developed by a PIC-MCC method. In this paper, the model is applied to the analysis of a low density plasma discharge initiation, with particular interest on the effect of the external magnetic field on the plasma properties, such as wall loss, electron density and electron energy. The use of a multi-cusp magnetic field effectively limits the wall losses, particularly in the radial direction. Preliminary results however indicate that a reduced heating efficiency results in such a configuration. The effect is possibly due to trapping of electrons in the multi-cusp magnetic field, preventing their continuous acceleration in the azimuthal direction.

  17. Formation Of Carbon Oxides In CH4/O2 Plasmas Produced By Inductively Coupled RF Discharges At Low Pressure

    International Nuclear Information System (INIS)

    Moeller, Ivonne; Soltwisch, Henning

    2003-01-01

    The formation of CO and CO2 has been studied in inductively coupled rf (13.56 MHz) discharges with varied mixtures of CH4 and O2 as feed gases at a total pressure of 10 Pa, flow rates of <10 sccm, and input powers of <500 W. The primary diagnostic tool has been TDLAS (tunable diode laser absorption spectroscopy) to measure absolute concentrations of molecular species as well as their kinetic and rovibrational temperatures. Of particular interest is the sudden transition between different modes of power coupling (capacitive and inductive mode, resp.) and the related changes of the plasma composition. We have found that the power threshold for this transition exhibits a clear hysteresis and depends on the oxygen content. Comparing the ratio of the CO- and CO2-concentrations in capacitive mode with corresponding data from a parallel-plate discharge, clear differences have been observed. The findings can partly be explained on the basis of plasma-chemical reaction chains using tabulated cross-sections in combination with estimations of the electron energy distribution function. Some observations (as, e.g. the presence of CO in inductively coupled plasmas that are fed by pure oxygen) cannot be understood from volume reactions only but point to an important role of surface processes, which depend on the materials of the discharge chamber and on its history and cleaning method

  18. Electric field measurements in the sheath of an argon RF discharge by probing with microparticles under varying gravity conditions

    NARCIS (Netherlands)

    Beckers, J.; Stoffels, W.W.; Kroesen, G.M.W.; Ockenga, T.; Wolter, M.; Kersten, H.

    2010-01-01

    The electric field profile in the plasma sheath of an argon rf plasma has been determined by measuring the equilibrium height and the resonance frequency of plasma-confined microparticles. In order to determine the electric field structure at any position in the plasma sheath without the discharge

  19. Plasma breakdown in a capacitively-coupled radiofrequency argon discharge

    Science.gov (United States)

    Smith, H. B.; Charles, C.; Boswell, R. W.

    1998-10-01

    Low pressure, capacitively-coupled rf discharges are widely used in research and commercial ventures. Understanding of the non-equilibrium processes which occur in these discharges during breakdown is of interest, both for industrial applications and for a deeper understanding of fundamental plasma behaviour. The voltage required to breakdown the discharge V_brk has long been known to be a strong function of the product of the neutral gas pressure and the electrode seperation (pd). This paper investigates the dependence of V_brk on pd in rf systems using experimental, computational and analytic techniques. Experimental measurements of V_brk are made for pressures in the range 1 -- 500 mTorr and electrode separations of 2 -- 20 cm. A Paschen-style curve for breakdown in rf systems is developed which has the minimum breakdown voltage at a much smaller pd value, and breakdown voltages which are significantly lower overall, than for Paschen curves obtained from dc discharges. The differences between the two systems are explained using a simple analytic model. A Particle-in-Cell simulation is used to investigate a similar pd range and examine the effect of the secondary emission coefficient on the rf breakdown curve, particularly at low pd values. Analytic curves are fitted to both experimental and simulation results.

  20. Hybrid simulation of electron energy distributions and plasma characteristics in pulsed RF CCP sustained in Ar and SiH4/Ar discharges

    Science.gov (United States)

    Wang, Xi-Feng; Jia, Wen-Zhu; Song, Yuan-Hong; Zhang, Ying-Ying; Dai, Zhong-Ling; Wang, You-Nian

    2017-11-01

    Pulsed-discharge plasmas offer great advantages in deposition of silicon-based films due to the fact that they can suppress cluster agglomeration, moderate the energy of bombarding ions, and prolong the species' diffusion time on the substrate. In this work, a one-dimensional fluid/Monte-Carlo hybrid model is applied to study pulse modulated radio-frequency (RF) plasmas sustained in capacitively coupled Ar and SiH4/Ar discharges. First, the electron energy distributions in pulsed Ar and SiH4/Ar plasmas have been investigated and compared under identical discharge-circuit conditions. The electron energy distribution function (EEDF) in Ar discharge exhibits a familiar bi-Maxwellian shape during the power-on phase of the pulse, while a more complex (resembling a multi-Maxwellian) distribution with extra inflection points at lower energies is observed in the case of the SiH4/Ar mixture. These features become more prominent with the increasing fraction of SiH4 in the gas mixture. The difference in the shape of the EEDF (which is pronounced inside the plasma but not in the RF sheath where electron heating occurs) is mainly attributed to the electron-impact excitations of SiH4. During the power-off phase of the pulse, the EEDFs in both Ar and SiH4/Ar discharges evolve into bi-Maxwellian shapes, with shrinking high energy tails. Furthermore, the parameter of ion species in the case of SiH4/Ar discharge is strongly modulated by pulsing. For positive ions, such as SiH3+ and Si2H4+ , the particle fluxes overshoot at the beginning of the power-on interval. Meanwhile, for negative ions such as SiH2- and SiH3- , density profiles observed between the electrodes are saddle-shaped due to the repulsion by the self-bias electric field as it builds up. During the power-off phase, the wall fluxes of SiH2- and SiH3- gradually increase, leading to a significant decrease in the net surface charge density on the driven electrode. Compared with ions, the density of SiH3 is poorly modulated

  1. Rotating dust ring in an RF discharge coupled with a dc-magnetron sputter source. Experiment and simulation

    International Nuclear Information System (INIS)

    Matyash, K; Froehlich, M; Kersten, H; Thieme, G; Schneider, R; Hannemann, M; Hippler, R

    2004-01-01

    During an experiment involving coating of dust grains trapped in an RF discharge using a sputtering dc-magnetron source, a rotating dust ring was observed and investigated. After the magnetron was switched on, the dust cloud levitating above the RF electrode formed a ring rotating as a rigid body. Langmuir probe diagnostics were used for the measurement of plasma density and potential. It was discovered that the coupling of the dc-magnetron source to the RF discharge causes steep radial gradients in electron density and plasma potential. The rotation of the dust ring is attributed to the azimuthal component of the ion drag force, which appears due to the azimuthal drift of the ions caused by crossed radial electric and axial magnetic fields. In order to get more insight into the mechanism of dust ring rotation, a Particle-in-Cell simulation of a rotating dust cloud was performed. The results of the experiment and simulation are presented and discussed

  2. Rotating dust ring in an RF discharge coupled with a dc-magnetron sputter source. Experiment and simulation

    Energy Technology Data Exchange (ETDEWEB)

    Matyash, K [Institut fuer Niedertemperaturplasmaphysik Greifswald, Fr.-L.-Jahn-Strasse 19, 17489 Greifswald (Germany); Froehlich, M [Institut fuer Physik, Ernst-Moritz-Arndt-Universitaet Greifswald, Domstrasse 10a, 17487 Greifswald (Germany); Kersten, H [Institut fuer Niedertemperaturplasmaphysik Greifswald, Fr.-L.-Jahn-Strasse 19, 17489 Greifswald (Germany); Thieme, G [Institut fuer Physik, Ernst-Moritz-Arndt-Universitaet Greifswald, Domstrasse 10a, 17487 Greifswald (Germany); Schneider, R [Max-Planck-Institut fuer Plasmaphysik, Teilinstitut Greifswald, Wendelsteinstrasse 1, 17489 Greifswald (Germany); Hannemann, M [Institut fuer Niedertemperaturplasmaphysik Greifswald, Fr.-L.-Jahn-Strasse 19, 17489 Greifswald (Germany); Hippler, R [Institut fuer Physik, Ernst-Moritz-Arndt-Universitaet Greifswald, Domstrasse 10a, 17487 Greifswald (Germany)

    2004-10-07

    During an experiment involving coating of dust grains trapped in an RF discharge using a sputtering dc-magnetron source, a rotating dust ring was observed and investigated. After the magnetron was switched on, the dust cloud levitating above the RF electrode formed a ring rotating as a rigid body. Langmuir probe diagnostics were used for the measurement of plasma density and potential. It was discovered that the coupling of the dc-magnetron source to the RF discharge causes steep radial gradients in electron density and plasma potential. The rotation of the dust ring is attributed to the azimuthal component of the ion drag force, which appears due to the azimuthal drift of the ions caused by crossed radial electric and axial magnetic fields. In order to get more insight into the mechanism of dust ring rotation, a Particle-in-Cell simulation of a rotating dust cloud was performed. The results of the experiment and simulation are presented and discussed.

  3. Ion energy and angular distributions in inductively coupled Argon RF discharges

    International Nuclear Information System (INIS)

    Woodworth, J.R.; Riley, M.E.; Meister, D.C.

    1996-03-01

    We report measurements of the energies and angular distributions of positive ions in an inductively coupled argon plasma in a GEC reference cell. Use of two separate ion detectors allowed measurement of ion energies and fluxes as a function of position as well as ion angular distributions on the discharge centerline. The inductive drive on our system produced high plasma densities (up to 10 12 /cm 3 electron densities) and relatively stable plasma potentials. As a result, ion energy distributions typically consisted of a single feature well separated from zero energy. Mean ion energy was independent of rf power and varied inversely with pressure, decreasing from 29 eV to 12 eV as pressure increased form 2.4 m Torr to 50 mTorr. Half-widths of the ion angular distributions in these experiments varied from 5 degrees to 12.5 degrees, or equivalently, transverse temperatures varied form 0.2 to 0.5 eV with the distributions broadening as either pressure or RF power were increased

  4. RF atmospheric plasma jet surface treatment of paper

    Science.gov (United States)

    Pawlat, Joanna; Terebun, Piotr; Kwiatkowski, Michał; Diatczyk, Jaroslaw

    2016-09-01

    A radio frequency RF atmospheric pressure plasma jet was used to enhance the wettability of cellulose-based paper of 90 g m-2 and 160 g m-2 grammage as a perspective platform for antibiotic sensitivity tests. Helium and argon were the carrier gases for oxygen and nitrogen; pure water and rapeseed oil were used for goniometric tests. The influence of the flow rate and gas type, the power of the discharge, and distance from the nozzle was examined. The surface structure was observed using an optical microscope. Attenuated total reflection Fourier transform infrared (ATR-FTIR) spectra were investigated in order to determine whether cellulose degradation processes occurred. The RF plasma jet allowed us to decrease the surface contact angle without drastic changes in other features of the tested material. Experiments confirmed the significant influence of the distance between the treated sample and reactor nozzle, especially for treatment times longer than 15 s due to the greater concentration of reactive species at the surface of the sample, which decreases with distance—and their accumulation effect with time. The increase of discharge power plays an important role in decreasing the surface contact angle for times longer than 10 s. Higher power had a positive effect on the amount of generated active particles and facilitated the ignition of discharge. However, a too high value can cause a rise in temperature of the material and heat-caused damage.

  5. Emission characteristics of 6.78-MHz radio-frequency glow discharge plasma in a pulsed mode

    Science.gov (United States)

    Zhang, Xinyue; Wagatsuma, Kazuaki

    2017-07-01

    This paper investigated Boltzmann plots for both atomic and ionic emission lines of iron in an argon glow discharge plasma driven by 6.78-MHz radio-frequency (RF) voltage in a pulsed operation, in order to discuss how the excitation/ionization process was affected by the pulsation. For this purpose, a pulse frequency as well as a duty ratio of the pulsed RF voltage was selected as the experimenter parameters. A Grimm-style radiation source was employed at a forward RF power of 70 W and at an argon pressures of 670 Pa. The Boltzmann plot for low-lying excited levels of iron atom was on a linear relationship, which was probably attributed to thermal collisions with ultimate electrons in the negative glow region; in this case, the excitation temperature was obtained in a narrow range of 3300-3400 K, which was hardly affected by the duty ratio as well as the pulse frequency of the pulsed RF glow discharge plasma. This observation suggested that the RF plasma could be supported by a self-stabilized negative glow region, where the kinetic energy distribution of the electrons would be changed to a lesser extent. Additional non-thermal excitation processes, such as a Penning-type collision and a charge-transfer collision, led to deviations (overpopulation) of particular energy levels of iron atom or iron ion from the normal Boltzmann distribution. However, their contributions to the overall excitation/ionization were not altered so greatly, when the pulse frequency or the duty ratio was varied in the pulsed RF glow discharge plasma.

  6. Optical constants of silicon-like (Si:Ox:Cy:Hz) thin films deposited on quartz using hexamethyldisiloxane in a remote RF hollow cathode discharge plasma

    International Nuclear Information System (INIS)

    Saloum, S.; Naddaf, M.

    2008-01-01

    Deposition of amorphous silicon-like (Si:O x :C y :H z ) thin films in a remote RF hollow cathode discharge plasma using Hexamethyldisoloxane as monomer and Ar as feed gas; has been investigated for films optical constants and plasma diagnostic as a function of RF power (100-300 W) and precursor flow rate (1-10 sccm). Plasma diagnostic has been performed using optical emission spectroscopy (OES). The optical constants (refractive index, extinction coefficient and dielectric constant) have been obtained by reflection/transmission measurements in the range 300-700 nm. It is found that the refractive index increases from 1.92 to 1.97 with increasing power from 100 to 300 W, and from 1.70 to 1.92 with increasing precursor flow rate from 1 to 10 sccm. The optical energy-band gap E g and the optical-absorption tail ΔE have been estimated from optical absorption spectra, it is found that E g decreases from 3.28 eV to 3.14 eV with power increase from 100 to 300 W, and from 3.54 eV to 3.28 eV with precursor flow rate increase from 1 to 10 sccm. ΔE is found to increase with applied RF power and precursor flow rate increase. The dependence of optical constants on deposition parameters has been correlated to plasma OES. (author)

  7. Hydrogen and helium trapping in tungsten deposition layers formed by RF plasma sputtering

    International Nuclear Information System (INIS)

    Kazunari Katayama; Kazumi Imaoka; Takayuki Okamura; Masabumi Nishikawa

    2006-01-01

    Understanding of tritium behavior in plasma facing materials is an important issue for fusion reactor from viewpoints of fuel control and radiation safety. Tungsten is used as a plasma facing material in the divertor region of ITER. However, investigation of hydrogen isotope behavior in tungsten deposition layer is not sufficient so far. It is also necessary to evaluate an effect of helium on a formation of deposition layer and an accumulation of hydrogen isotopes because helium generated by fusion reaction exists in fusion plasma. In this study, tungsten deposition layers were formed by sputtering method using hydrogen and helium RF plasma. An erosion rate and a deposition rate of tungsten were estimated by weight measurement. Hydrogen and helium retention were investigated by thermal desorption method. Tungsten deposition was performed using a capacitively-coupled RF plasma device equipped with parallel-plate electrodes. A tungsten target was mounted on one electrode which is supplied with RF power at 200 W. Tungsten substrates were mounted on the other electrode which is at ground potential. The plasma discharge was continued for 120 hours where pressure of hydrogen or helium was controlled to be 10 Pa. The amounts of hydrogen and helium released from deposition layers was quantified by a gas chromatograph. The erosion rate of target tungsten under helium plasma was estimated to be 1.8 times larger than that under hydrogen plasma. The deposition rate on tungsten substrate under helium plasma was estimated to be 4.1 times larger than that under hydrogen plasma. Atomic ratio of hydrogen to tungsten in a deposition layer formed by hydrogen plasma was estimated to be 0.17 by heating to 600 o C. From a deposition layer formed by helium plasma, not only helium but also hydrogen was released by heating to 500 o C. Atomic ratios of helium and hydrogen to tungsten were estimated to be 0.080 and 0.075, respectively. The trapped hydrogen is probably impurity hydrogen

  8. The effect of discharge chamber geometry on the characteristics of low-pressure RF capacitive discharges

    Energy Technology Data Exchange (ETDEWEB)

    Lisovskiy, V.A. [Ecole Polytech, Lab Phys and Technol Plasmas, F-91128 Palaiseau, (France); Booth, J.P. [Lam Res Corp, Fremont, CA 94538 (United States); Landry, K. [Unaxis, F-38100 Grenoble, (France); Douai, D. [CEA Cadarache, Dept Rech Fus Controlee, EURATOM Assoc, F-13108 St Paul Les Durance, (France); Cassagne, V. [Riber, F-95873 Bezons, (France); Yegorenkov, V.D. [Kharkov Natl Univ, Dept Phys, UA-61077 Kharkov, (Ukraine)

    2007-07-01

    We report the measured extinction curves and current voltage characteristics (CVCs) in several gases of RF capacitive discharges excited at 13.56 MHz in chambers of three different geometries: 1) parallel plates surrounded by a dielectric cylinder ('symmetric parallel plate'); 2) parallel plates surrounded by a metallic cylinder ('asymmetric confined'); and 3) parallel plates inside a much larger metallic chamber ('asymmetric unconfined'), similar to the gaseous electronics conference reference cell. The extinction curves and the CVCs show differences between the symmetric, asymmetric confined, and asymmetric unconfined chamber configurations. In particular, the discharges exist over a much broader range of RF voltages and gas pressures for the asymmetric unconfined chamber. For symmetric and asymmetric confined discharges, the extinction curves are close to each other in the regions near the minima and at lower pressure, but at higher pressure, the extinction curve of the asymmetric confined discharge runs at a lower voltage than the one for the discharge in a symmetric chamber. In the particular cases of an 'asymmetric unconfined chamber' discharge or 'asymmetric confined' one, the RF discharge experiences the transition from a 'weak-current' mode to a 'strong-current' one at lower RF voltages than is the case for a 'symmetric parallel-plate' discharge. (authors)

  9. RF-heating and plasma confinement studies in HANBIT mirror device

    International Nuclear Information System (INIS)

    Kwon, M.; Bak, J.G.; Choh, K.K.

    2003-01-01

    HANBIT is a magnetic mirror confinement device. Recently, with almost finishing the first campaign for the basic system development, it started the second campaign for the high-temperature plasma confinement physics study in mirror configuration. Here, we introduce briefly the HANBIT device and report initial physics experiments results on RF-plasma heating and confinement in the simple mirror configuration. It appears that the discharge characteristics of HANBIT are quite different from those in other mirror devices, and an explanation is presented to clarify the difference. (author)

  10. The Bohm criterion for rf discharges

    International Nuclear Information System (INIS)

    Meijer, P.M.; Goedheer, W.J.

    1991-01-01

    The well-known dc Bohm criterion is extended to rf discharges. Both low- (ω rf much-lt ω pi ) and high-(ω pi much-lt ω rf ) frequency regimes are considered. For low frequencies, the dc Bohm criterion holds. This criterion states that the initial energy of the ions entering the sheath must exceed a limit in order to obtain a stable sheath. For high frequencies, a modified limit is derived, which is somewhat lower than that of the dc Bohm criterion. The resulting ion current density in a high-frequency sheath is only a few percent lower than that for the dc case

  11. Effects of rf power on chemical composition and surface roughness of glow discharge polymer films

    Energy Technology Data Exchange (ETDEWEB)

    Zhang, Ling; He, Xiaoshan; Chen, Guo; Wang, Tao; Tang, Yongjian; He, Zhibing, E-mail: hezhibing802@163.com

    2016-03-15

    Graphical abstract: - Highlights: • The growth mechanism of defects in GDP films was studied upon plasma diagnosis. • Increasing rf power enhanced the etching effects of smaller-mass species. • The “void” defect was caused by high energy hydrocarbons bombardment on the surface. • The surface roughness was only 12.76 nm, and no “void” defect was observed at 30 W. - Abstract: The glow discharge polymer (GDP) films for laser fusion targets were successfully fabricated by plasma enhanced chemical vapor deposition (PECVD) at different radio frequency (rf) powers. The films were deposited using trans-2-butene (T{sub 2}B) mixed with hydrogen as gas sources. The composition and state of plasma were diagnosed by quadrupole mass spectrometer (QMS) and Langmuir probe during the deposition process. The composition, surface morphology and roughness were investigated by Fourier transform infrared spectroscopy (FTIR), scanning electron microscope (SEM) and white-light interferometer (WLI), respectively. Based on these observation and analyses, the growth mechanism of defects in GDP films were studied. The results show that, at low rf power, there is a larger probability for secondary polymerization and formation of multi-carbon C-H species in the plasma. In this case, the surface of GDP film turns to be cauliflower-like. With the increase of rf power, the degree of ionization is high, the relative concentration of smaller-mass hydrocarbon species increases, while the relative concentration of larger-mass hydrocarbon species decreases. At higher rf power, the energy of smaller-mass species are high and the etching effects are strong correspondingly. The GDP film's surface roughness shows a trend of decrease firstly and then increase with the increasing rf power. At rf power of 30 W, the surface root-mean-square roughness (Rq) drops to the lowest value of 12.8 nm, and no “void” defect was observed.

  12. Three dimensional complex plasma structures in a combined radio frequency and direct current discharge

    International Nuclear Information System (INIS)

    Mitic, S.; Morfill, G. E.; Klumov, B. A.; Khrapak, S. A.

    2013-01-01

    We report on the first detailed analysis of large three dimensional (3D) complex plasma structures in experiments performed in pure rf and combined rf+dc discharge modes. Inductively coupled plasma is generated by an rf coil wrapped around the vertically positioned cylindrical glass tube at a pressure of 0.3 mbar. In addition, dc plasma can be generated by applying voltage to the electrodes at the ends of the tube far from the rf coil. The injected monodisperse particles are levitated in the plasma below the coil. A scanning laser sheet and a high resolution camera are used to determine the 3D positions of about 10 5 particles. The observed bowl-shaped particle clouds reveal coexistence of various structures, including well-distinguished solid-like, less ordered liquid-like, and pronounced string-like phases. New criteria to identify string-like structures are proposed.

  13. Spatio-temporal powder formation and trapping in RF silane plasmas using 2-D polarization-sensitive laser scattering

    International Nuclear Information System (INIS)

    Dorier, J.L.; Hollenstein, C.; Howling, A.A.

    1994-09-01

    Powder formation studies in deposition plasmas are motivated by the need to reduce contamination in the plasma and films. Models for the force acting upon particles in rf discharges suffer from a lack of quantitative experimental data for comparison in the case of silane-containing plasmas. In this work, a cross-section of the parallel-plate capacitor discharge is illuminated with a polarized beam-expanded laser and global spatio-temporal scattered light and extinction are recorded by CCD cameras. Spatially-regular periodic bright/dark zones due to constructive/destructive Mie interference are visible over large regions of the powder layers, which shows the uniform nature of particle growth in silane plasmas. For particles trapped in an argon plasma, as for steady-state conditions in silane, spatial size segregation is demonstrated by fringes which reverse according to the polarisation of scattered light. The method allow a self-consistent estimation of particle size and number density throughout the discharge volume from which strong particle Coulomb coupling (Γ>40) is suggested to influence powder dynamics. Correction must be made to the plasma emission profile for the extinction by powder. In conclusion, this global diagnostics improves understanding of particle growth and dynamics in silane rf discharges and provides experimental input for testing the validity of models. (author) 6 figs., 43 refs

  14. Electron runaway in rf discharges

    International Nuclear Information System (INIS)

    Chen, F.F.

    1992-10-01

    The critical electric field is computed as a function of pressure and starting energy for electrons to run away to high energies in moderate pressure discharges. The runaway conditions depend critically on the shape of the elastic cross section vs. energy curve. Computations are made for H, H 2 , and He gases, and it is shown that runaway occurs much more readily in atomic hydrogen than in the other gases. The values of the runaway fields are larger than would normally occur in dc discharges, where large voltages would lead to arc formation. However, in rf discharges such electric fields can be sustained over times long compared to electron transit times but short compared to ion transit times. (author)

  15. Study of the electron energy distribution function in plasma produced by a rf discharge in a mixture of inert gases

    International Nuclear Information System (INIS)

    Vagner, S.D.; Ignat'ev, B.K.

    1983-01-01

    Electron energy distribution functions (EEDF) are recorded in an rf discharge in a mixture of neon and argon. The rates of different ionization processes and the energy losses of the electrons in the bulk of the discharge are calculated. The experimentally recorded electron energy distribution functions are compared with distributions calculated using a nonlocal theory. The effect of an rf voltage in the probe circuit on the recorded electron energy distribution functions is investigated experimentally

  16. Modification of surface properties of LLDPE by water plasma discharge

    International Nuclear Information System (INIS)

    Chantara Thevy Ratnam; Hill, D.J.T.; Firas Rasoul; Whittaker, A.K.; Imelda Keen

    2007-01-01

    Linear low density polyethylene (LLDPE) surface was modified by water plasma treatment. The LLDPE surface was treated at 10 and 20 W discharge power at various exposure times. A laboratory scale Megatherm radio frequency (RF) plasma apparatus that operates at 27 MHz was used to generate the water plasmas. The changes in chemical structure of the LLDPE polymeric chain upon plasma treatment were characterized by FTIR and XPS techniques. The selectivity of trifluoroacetic anhydride (TFAA) toward hydroxyl groups is used to quantify the hydroxyl groups formed on the polymer surface upon plasma treatment. After exposition to the plasma discharge a decline in water contact angle were observed. FTIR and XPS measurements indicate an oxidation of degraded polymeric chains and creation of hydroxyl, carbonyl, ether, ester and carboxyl groups. Chemical derivatization with TFAA of water plasma treated polymer surfaces has shown that under the conditions employed, a very small (less than 5%) of the oxygen introduced by the water plasma treatment was present as hydroxyl group. (Author)

  17. Investigation of parameters of the working substance - low temperature plasma in the ionization resonator chamber of the RF reactive engine

    International Nuclear Information System (INIS)

    Vdovin, V.S.; Zajtzev, B.V.; Kobetz, A.F.; Bomko, V.A.; Rashkovan, V.M.; Bazyma, L.A.; Belokon, V.I.

    2003-01-01

    This paper is the extension of investigations of the RF engine designed for orientation and stabilization of the spacecrafts orbit, and it is undertaken for measuring of plasma parameters of RF discharge in the ionization resonator chamber. The experiments were performed at the frequency of 80 MHz on the model engine, in which a length of coaxial line with shortening capacities at the ends was used as the ionization resonator chamber. As the result of the experiments, conditions of the RF discharge ignition in the resonator chamber are studied; dependencies of plasma density and temperature versus applied power and working body pressure are obtained for various gases. The measurements of the thrust were performed at the special-purpose test bench

  18. Control of hydrocarbon radicals and film deposition by using an RF Whistler wave discharge

    International Nuclear Information System (INIS)

    Mieno, Tetsu; Shoji, Tatsuo; Kadota, Kiyoshi.

    1991-10-01

    Production of hydrocarbon radicals is controlled by using an RF Whistler wave discharge in a low pressure region (∼0.1 Pa). Plasma density of 10 10 - 10 13 cm -3 , electron temperature of 2-20 eV is obtained for the discharge of admixture of Ar and small content of source gases (CH 4 , C 2 H 2 , CO). Spectroscopic measurement indicates that densities of CH and H radicals and deposition rate of amorphous carbon:H film increase with electron density, electron temperature and source gas pressure. The etching effect of H atoms influences on the deposition rate and a high deposition rate (90 μm/hr for CO/Ar discharge) is obtained even in a low neutral pressure discharge. (author)

  19. Etching of uranium dioxide in nitrogen trifluoride RF plasma glow discharge

    Science.gov (United States)

    Veilleux, John Mark

    1999-10-01

    A series of room temperature, low pressure (10.8 to 40 Pa), low power (25 to 210 W) RF plasma glow discharge experiments with UO2 were conducted to demonstrate that plasma treatment is a viable method for decontaminating UO2 from stainless steel substrates. Experiments were conducted using NF3 gas to decontaminate depleted uranium dioxide from stainless-steel substrates. Results demonstrated that UO2 can be completely removed from stainless-steel substrates after several minutes processing at under 200 W. At 180 W and 32.7 Pa gas pressure, over 99% of all UO2 in the samples was removed in just 17 minutes. The initial etch rate in the experiments ranged from 0.2 to 7.4 mum/min. Etching increased with the plasma absorbed power and feed gas pressure in the range of 10.8 to 40 Pa. A different pressure effect on UO2 etching was also noted below 50 W in which etching increased up to a maximum pressure, ˜23 Pa, then decreased with further increases in pressure. A computer simulation, CHEMKIN, was applied to predict the NF3 plasma species in the experiments. The code was validated first by comparing its predictions of the NF3 plasma species with mass spectroscopy etching experiments of silicon. The code predictions were within +/-5% of the measured species concentrations. The F atom radicals were identified as the primary etchant species, diffusing from the bulk plasma to the UO2 surface and reacting to form a volatile UF6, which desorbed into the gas phase to be pumped away. Ions created in the plasma were too low in concentration to have a major effect on etching, but can enhance the etch rate by removing non-volatile reaction products blocking the reaction of F with UO2. The composition of these non-volatile products were determined based on thermodynamic analysis and the electronic structure of uranium. Analysis identified possible non-volatile products as the uranium fluorides, UF2-5, and certain uranium oxyfluorides UO2F, UO2F2, UOF3, and UOF 4 which form over the

  20. Singlet oxygen generation in O2 flow excited by RF discharge: I. Homogeneous discharge mode: α-mode

    International Nuclear Information System (INIS)

    Braginskiy, O V; Vasilieva, A N; Klopovskiy, K S; Kovalev, A S; Lopaev, D V; Proshina, O V; Rakhimova, T V; Rakhimov, A T

    2005-01-01

    The production and transport dynamics of O 2 (a 1 Δ g ) and O 2 (b 1 Σ g + ) molecules as well as O( 3 P) atoms has been studied in an O 2 flow excited by a 13.56 MHz RF discharge in a quartz tube at pressures of 1-20 Torr. It has been shown that the densities of O 2 (a 1 Δ g ) and O( 3 P) are saturated with increasing energy input into the discharge. The maximum yield of singlet oxygen (SO) and the O 2 dissociation degree drops with pressure. It is demonstrated that depending on the energy input the RF discharge can exist in three modes: I-in the spatially homogeneous mode or α-mode; III-in the substantially inhomogeneous mode, when plasma jets are present outside the discharge; and II-in the transient mode between modes I and III. In this paper only the homogeneous mode of RF discharge in the O 2 flow is considered in detail. A self-consistent model of the α-mode is developed, that allows us to analyse elementary processes responsible for the production and loss of O 2 (a 1 Δ g ) and O 2 (b 1 Σ g + ) molecules as well as O( 3 P) atoms in detail. To verify both the kinetic scheme of the model and the conclusions, some experiments have been carried out at lower flow velocities and higher pressures (≥10 Torr), when the stationary densities of O 2 (a 1 Δ g ), O 2 (b 1 Σ g + ) and O( 3 P) in the discharge area were established not by the escape of particles but by the losses due to the volumetric and surface reactions. The O 2 (b 1 Σ g + ) density under these conditions is determined by the balance of O 2 (b 1 Σ g + ) production by both direct electron impact and electronic excitation transfer from metastable O( 1 D) atoms and deactivation by oxygen atoms and tube walls, including quenching by ozone in the afterglow. The O( 3 P) density is determined by the balance between the production through O 2 dissociation by electron impact and heterogeneous loss at the wall recombination. The stationary density of O 2 (a 1 Δ g ) is provided by the processes of O

  1. Observation of radio frequency ring-shaped hollow cathode discharge plasma with MgO and Al electrodes for plasma processing

    International Nuclear Information System (INIS)

    Ohtsu, Yasunori; Matsumoto, Naoki

    2014-01-01

    Various high-density plasma sources have been proposed for plasma processing. Especially, the hollow cathode discharge is one of the powerful ones. In this work, radio-frequency (RF) driven ring-shaped hollow cathode discharges with high secondary-electron emission have been investigated, using an aluminum (Al) cathode, coated or not with magnesium oxide (MgO). The thickness of MgO thin film is approximately 200 nm. The RF discharge voltage for the coated cathode is almost the same as that for the uncoated one, in a wide range of Ar gas pressure, from 5.3 to 53.2 Pa. The results reveal that the plasma density has a peak at an Ar gas pressure of 10.6 Pa for both cathodes. The plasma density for the coated cathode is about 1.5–3 times higher than that for the uncoated one, at various gas pressures. To the contrary, the electron temperature for the coated cathode is lower than temperature obtained with the uncoated cathode, at various gas pressures. Radial profiles of electron saturation current, which is proportional to plasma flux, are also examined for a wide range of gas pressure. Radial profiles of electron temperature at various axial positions are almost uniform for both cathodes so that the diffusion process due to density gradient is dominant for plasma transport. The secondary electrons emitted from the coated cathode contribute to the improvement of the plasma flux radial profile obtained using the uncoated cathode

  2. Investigation of Inonotus obliquus (Pers. Pil. Extracts and Melanins after RF-plasma Treatment of Raw Material

    Directory of Open Access Journals (Sweden)

    O.Yu. Kuznetsova

    2016-03-01

    Full Text Available High-frequency capacitive discharge (RF plasma at low pressure was used as preliminary stage for the intensification of extraction from natural medicinal raw material. RF-plasma treatment was carried out in two modes differed by the nature of plasma-forming gas. Chaga (Inonotus obliquus (Pers. Pil. known as the birch mushroom was selected as a perspective source of raw material. Extraction was carried out in two ways – remaceration and maceration. The analy-sis of chaga extracts and melanins was performed using traditional techniques including determination of physical and chemical, antioxidant and spectral characteristics. The obtained extracts and melanins were compared to the control samples and literature data. RF-plasma treatment of medicinal raw material increased the yield of extractive substances, in particular of the main active component of chaga – melanin. The antioxidant activity of chaga extracts grew, while for melanins it remained at the level similar to that of control samples. The IR spectral characteristics of the studied chaga melanins are similar and agree well with the literature data. Insignificant deviations in the position and intensity of absorption strips were observed for the samples after RF treatment. IR spectra of the studied chaga melanins are similar to those for mushroom melanins, thereby confirming the similarity in their nature. RF-plasma treatment of chaga medicinal raw materials allows to modify them partially. The structural and mechanical properties of melanins modified by RF plasma remain the same.

  3. Etching of UO2 in NF3 RF Plasma Glow Discharge

    Energy Technology Data Exchange (ETDEWEB)

    Veilleux, John M. [Univ. of California, Berkeley, CA (United States)

    1999-08-01

    A series of room temperature, low pressure (10.8 to 40 Pa), low power (25 to 210 W) RF plasma glow discharge experiments with UO2 were conducted to demonstrate that plasma treatment is a viable method for decontaminating UO2 from stainless steel substrates. Experiments were conducted using NF3 gas to decontaminate depleted uranium dioxide from stainless-steel substrates. Depleted UO2 samples each containing 129.4 Bq were prepared from 100 microliter solutions of uranyl nitrate hexahydrate solution. The amorphous UO2 in the samples had a relatively low density of 4.8 gm/cm3. Counting of the depleted UO2 on the substrate following plasma immersion was performed using liquid scintillation counting with alpha/beta discrimination due to the presence of confounding beta emitting daughter products, 234Th and 234Pa. The alpha emission peak from each sample was integrated using a gaussian and first order polynomial fit to improve quantification. The uncertainties in the experimental measurement of the etched material were estimated at about ± 2%. Results demonstrated that UO2 can be completely removed from stainless-steel substrates after several minutes processing at under 200 W. At 180 W and 32.7 Pa gas pressure, over 99% of all UO2 in the samples was removed in just 17 minutes. The initial etch rate in the experiments ranged from 0.2 to 7.4 μm/min. Etching increased with the plasma absorbed power and feed gas pressure in the range of 10.8 to 40 Pa. A different pressure effect on UO2 etching was also noted below 50 W in which etching increased up to a maximum pressure, ~23 Pa, then decreased with further increases in pressure.

  4. “Virtual IED sensor” at an rf-biased electrode in low-pressure plasma

    Energy Technology Data Exchange (ETDEWEB)

    Bogdanova, M. A.; Zyryanov, S. M. [Skobeltsyn Institute of Nuclear Physics, Moscow State University, SINP MSU, Moscow (Russian Federation); Faculty of Physics, Moscow State University, MSU, Moscow (Russian Federation); Lopaev, D. V.; Rakhimov, A. T. [Skobeltsyn Institute of Nuclear Physics, Moscow State University, SINP MSU, Moscow (Russian Federation)

    2016-07-15

    Energy distribution and the flux of the ions coming on a surface are considered as the key-parameters in anisotropic plasma etching. Since direct ion energy distribution (IED) measurements at the treated surface during plasma processing are often hardly possible, there is an opportunity for virtual ones. This work is devoted to the possibility of such indirect IED and ion flux measurements at an rf-biased electrode in low-pressure rf plasma by using a “virtual IED sensor” which represents “in-situ” IED calculations on the absolute scale in accordance with a plasma sheath model containing a set of measurable external parameters. The “virtual IED sensor” should also involve some external calibration procedure. Applicability and accuracy of the “virtual IED sensor” are validated for a dual-frequency reactive ion etching (RIE) inductively coupled plasma (ICP) reactor with a capacitively coupled rf-biased electrode. The validation is carried out for heavy (Ar) and light (H{sub 2}) gases under different discharge conditions (different ICP powers, rf-bias frequencies, and voltages). An EQP mass-spectrometer and an rf-compensated Langmuir probe (LP) are used to characterize plasma, while an rf-compensated retarded field energy analyzer (RFEA) is applied to measure IED and ion flux at the rf-biased electrode. Besides, the pulsed selfbias method is used as an external calibration procedure for ion flux estimating at the rf-biased electrode. It is shown that pulsed selfbias method allows calibrating the IED absolute scale quite accurately. It is also shown that the “virtual IED sensor” based on the simplest collisionless sheath model allows reproducing well enough the experimental IEDs at the pressures when the sheath thickness s is less than the ion mean free path λ{sub i} (s < λ{sub i}). At higher pressure (when s > λ{sub i}), the difference between calculated and experimental IEDs due to ion collisions in the sheath is observed in the low

  5. Paschen like behavior in argon RF discharge

    International Nuclear Information System (INIS)

    Al-Jwaady, Y. I.

    2011-01-01

    A 13.56 MHz radio frequency inductively coupled discharge system is used in this work to study the relation between Argon gas pressure in the discharge chamber and the threshold breakdown RF power needed to create the discharge. Experimental results indicated that although the data involve some features related to the traditional Paschen relation used in Dc discharge, this relation cannot provide a quantitative description of experimental data. For such reason, a modified from Paschen relation is suggested. The modified relation provides good agreement with experimental data. Furthermore, it seems that the Paschen relation will have significant reflections on the behavior of the transit process from capacitive to inductive discharge. This is demonstrated by studying the transit region. (author)

  6. Production of low-density plasma by coaxially segmented rf discharge for void-free dusty cloud in microgravity experiments

    International Nuclear Information System (INIS)

    Suzukawa, Wataru; Ikada, Reijiro; Tanaka, Yasuhiro; Iizuka, Satoru

    2006-01-01

    A technique is presented for producing a low density plasma by introducing a coaxially segmented parallel-plate radio-frequency discharge for void-free dusty-cloud formation. Main plasma for the dusty plasma experiment is produced in a central core part of the parallel-plate discharge, while a plasma for igniting the core plasma discharge is produced in the periphery region surrounding the core plasma. The core plasma density can be markedly decreased to reduce the ion drag force, which is important for a formation of void-free dusty cloud under microgravity

  7. Vortex formation during rf heating of plasma

    International Nuclear Information System (INIS)

    Motley, R.W.

    1980-05-01

    Experiments on a test plasma show that the linear theory of waveguide coupling to slow plasma waves begins to break down if the rf power flux exceeds approx. 30 W/cm 2 . Probe measurements reveal that within 30 μs an undulation appears in the surface plasma near the mouth of the twin waveguide. This surface readjustment is part of a vortex, or off-center convective cell, driven by asymmetric rf heating of the plasma column

  8. Progress towards RF heated steady-state plasma operations on LHD by employing ICRF heating methods and improved divertor plates

    International Nuclear Information System (INIS)

    Kumazawa, R.; Mutoh, T.; Saito, K.

    2008-10-01

    A long pulse plasma discharge experiment was carried out using RF heating power in the Large Helical Device (LHD), a currentless magnetic confining system. Progress in long pulse operation is summarized since the 10th experimental campaign (2006). A scaling relation of the plasma duration time to the applied RF power has been derived from the experimental data so far collected. It indicates that there exists a critical divertor temperature and consequently a critical RF heating power P RFcrit =0.65 MW. The area on the graph of the duration time versus the RF heating power was extended over the scaling relation by replacing divertor plates with new ones with better heat conductivity. The cause of the plasma collapse at the end of the long pulse operation was found to be the penetration of metal impurities. Many thin flakes consisting of heavy metals and graphite in stratified layers were found on the divertor plates and it was thought that they were the cause of impurity metals penetrating into the plasma. In a simulation involving injecting a graphite-coated Fe pellet to the plasma it was found that 230 Eμm in the diameter of the Fe pellet sphere was the critical size which led the plasma to collapse. A mode-conversion heating method was examined in place of the minority ICRF heating which has been employed in almost all the long-pulse plasma discharges. It was found that this method was much better from the viewpoint of achieving uniformity of the plasma heat load to the divertors. It is expected that P RFcrit will be increased by using the mode-conversion heating method. (author)

  9. Diagnostic of capacitively coupled radio frequency plasma from electrical discharge characteristics: comparison with optical emission spectroscopy and fluid model simulation

    Science.gov (United States)

    Xiang, HE; Chong, LIU; Yachun, ZHANG; Jianping, CHEN; Yudong, CHEN; Xiaojun, ZENG; Bingyan, CHEN; Jiaxin, PANG; Yibing, WANG

    2018-02-01

    The capacitively coupled radio frequency (CCRF) plasma has been widely used in various fields. In some cases, it requires us to estimate the range of key plasma parameters simpler and quicker in order to understand the behavior in plasma. In this paper, a glass vacuum chamber and a pair of plate electrodes were designed and fabricated, using 13.56 MHz radio frequency (RF) discharge technology to ionize the working gas of Ar. This discharge was mathematically described with equivalent circuit model. The discharge voltage and current of the plasma were measured at different pressures and different powers. Based on the capacitively coupled homogeneous discharge model, the equivalent circuit and the analytical formula were established. The plasma density and temperature were calculated by using the equivalent impedance principle and energy balance equation. The experimental results show that when RF discharge power is 50-300 W and pressure is 25-250 Pa, the average electron temperature is about 1.7-2.1 eV and the average electron density is about 0.5 × 1017-3.6 × 1017 m-3. Agreement was found when the results were compared to those given by optical emission spectroscopy and COMSOL simulation.

  10. Characteristic performance of radio-frequency(RF) plasma heating using inverter RF power supplies

    International Nuclear Information System (INIS)

    Imai, Takahiro; Uesugi, Yoshihiko; Takamura, Shuichi; Sawada, Hiroyuki; Hattori, Norifumi

    2000-01-01

    High heat flux plasma are produced by high powe (∼14 kW) ICRF heating using inverter power supplies in the linear divertor simulator NAGDIS-II. The power flow of radiated rf power is investigated by a calorimetric method. Conventional power calculation using antenna voltage and current gives that about 70% of the rf power is radiated into the plasma. But increase of the heat load at the target and anode is about 10% of the rf power. Through this experiment, we find that about half of the rf power is lost at the antenna surface through the formation of rf induced sheath. And about 30% of the power is lost into the vacuum vessel through the charge exchange and elastic collision of ions with neutrals. (author)

  11. RF and microwave diagnostics of plasma

    International Nuclear Information System (INIS)

    Basu, J.

    1976-01-01

    A brief review of RF and microwave investigations carried out at laboratory plasma is presented. Both the immersive and non-immersive RF probes of various types are discussed, the major emphasis being laid on the work carried out in extending the scope of the immersive impedance probe and non-immersive coil probe. The standard microwave methods for plasma diagnosis are mentioned. The role of relatively new diagnostic tool, viz., a dielectric-rod waveguide, is described, and the technique of measuring the admittance of such a waveguide (or an antenna) enveloped in plasma is discussed. (K.B.)

  12. Equiintensities of RF plasma discharges

    International Nuclear Information System (INIS)

    Vaculik, R.; Brablec, A.; Kapicka, V.; St'astny, F.

    1998-01-01

    The presented diagnostic tool can provide information of temperature distribution in the plasma. The main advantage of the method is relatively simple, low cost and quick procedure. On the other hand the individual isoline corresponds to some mean values for the wide bandwidth of interference filter. However, in real plasma sources is usually difficult to find isolated intensive line which is characterized by excitation temperature. Nevertheless, we believe that application is useful and fulfills other diagnostics methods. The visualisation of temperature field can help to understand conditions in plasmas and processes occurring there. However, the fast procedure (in real time) will be useful only. It has to be done during each experiment and carefully coupled with other diagnostic methods. It means that the device must be the low cost one. (author)

  13. Plasma Discharge Process in a Pulsed Diaphragm Discharge System

    Science.gov (United States)

    Duan, Jianjin; Hu, Jue; Zhang, Chao; Wen, Yuanbin; Meng, Yuedong; Zhang, Chengxu

    2014-12-01

    As one of the most important steps in wastewater treatment, limited study on plasma discharge process is a key challenge in the development of plasma applications. In this study, we focus on the plasma discharge process of a pulsed diaphragm discharge system. According to the analysis, the pulsed diaphragm discharge proceeds in seven stages: (1) Joule heating and heat exchange stage; (2) nucleated site formation; (3) plasma generation (initiation of the breakdown stage); (4) avalanche growth and plasma expansion; (5) plasma contraction; (6) termination of the plasma discharge; and (7) heat exchange stage. From this analysis, a critical voltage criterion for breakdown is obtained. We anticipate this finding will provide guidance for a better application of plasma discharges, especially diaphragm plasma discharges.

  14. Microwave induced plasma discharge in multi-cell superconducting radio-frequency cavity

    International Nuclear Information System (INIS)

    Ahmed, Shahid; Mammosser, John D.

    2015-01-01

    A R&D effort for in situ cleaning of 1.5 GHz Superconducting Radio Frequency (SRF) cavities at room temperature using the plasma processing technique has been initiated at Jefferson Lab. This is a step toward the cleaning of cryomodules installed in the Continuous Electron Beam Accelerator Facility (CEBAF). For this purpose, we have developed an understanding of plasma discharge in a 5-cell CEBAF-type SRF cavity having configurations similar to those in the main accelerator. The focus of this study involves the detailed investigations of developing a plasma discharge inside the cavity volume and avoids the breakdown condition in the vicinity of the ceramic RF window. A plasma discharge of the gas mixture Ar–O 2 (90%:10%) can be established inside the cavity volume by the excitation of a resonant 4π/5 TM 010 -mode driven by a klystron. The absence of any external magnetic field for generating the plasma is suitable for cleaning cavities installed in a complex cryomodule assembly. The procedures developed in these experimental investigations can be applied to any complex cavity structure. Details of these experimental measurements and the observations are discussed in the paper

  15. Microwave induced plasma discharge in multi-cell superconducting radio-frequency cavity

    Energy Technology Data Exchange (ETDEWEB)

    Ahmed, Shahid, E-mail: shahid.ahmed@ieee.org [BML Munjal University, Gurgaon, Haryana 123413 (India); Mammosser, John D. [Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831 (United States)

    2015-07-15

    A R&D effort for in situ cleaning of 1.5 GHz Superconducting Radio Frequency (SRF) cavities at room temperature using the plasma processing technique has been initiated at Jefferson Lab. This is a step toward the cleaning of cryomodules installed in the Continuous Electron Beam Accelerator Facility (CEBAF). For this purpose, we have developed an understanding of plasma discharge in a 5-cell CEBAF-type SRF cavity having configurations similar to those in the main accelerator. The focus of this study involves the detailed investigations of developing a plasma discharge inside the cavity volume and avoids the breakdown condition in the vicinity of the ceramic RF window. A plasma discharge of the gas mixture Ar–O{sub 2} (90%:10%) can be established inside the cavity volume by the excitation of a resonant 4π/5 TM{sub 010}-mode driven by a klystron. The absence of any external magnetic field for generating the plasma is suitable for cleaning cavities installed in a complex cryomodule assembly. The procedures developed in these experimental investigations can be applied to any complex cavity structure. Details of these experimental measurements and the observations are discussed in the paper.

  16. Microwave induced plasma discharge in multi-cell superconducting radio-frequency cavity

    Science.gov (United States)

    Ahmed, Shahid; Mammosser, John D.

    2015-07-01

    A R&D effort for in situ cleaning of 1.5 GHz Superconducting Radio Frequency (SRF) cavities at room temperature using the plasma processing technique has been initiated at Jefferson Lab. This is a step toward the cleaning of cryomodules installed in the Continuous Electron Beam Accelerator Facility (CEBAF). For this purpose, we have developed an understanding of plasma discharge in a 5-cell CEBAF-type SRF cavity having configurations similar to those in the main accelerator. The focus of this study involves the detailed investigations of developing a plasma discharge inside the cavity volume and avoids the breakdown condition in the vicinity of the ceramic RF window. A plasma discharge of the gas mixture Ar-O2 (90%:10%) can be established inside the cavity volume by the excitation of a resonant 4π/5 TM010-mode driven by a klystron. The absence of any external magnetic field for generating the plasma is suitable for cleaning cavities installed in a complex cryomodule assembly. The procedures developed in these experimental investigations can be applied to any complex cavity structure. Details of these experimental measurements and the observations are discussed in the paper.

  17. Microwave induced plasma discharge in multi-cell superconducting radio-frequency cavity.

    Science.gov (United States)

    Ahmed, Shahid; Mammosser, John D

    2015-07-01

    A R&D effort for in situ cleaning of 1.5 GHz Superconducting Radio Frequency (SRF) cavities at room temperature using the plasma processing technique has been initiated at Jefferson Lab. This is a step toward the cleaning of cryomodules installed in the Continuous Electron Beam Accelerator Facility (CEBAF). For this purpose, we have developed an understanding of plasma discharge in a 5-cell CEBAF-type SRF cavity having configurations similar to those in the main accelerator. The focus of this study involves the detailed investigations of developing a plasma discharge inside the cavity volume and avoids the breakdown condition in the vicinity of the ceramic RF window. A plasma discharge of the gas mixture Ar-O2 (90%:10%) can be established inside the cavity volume by the excitation of a resonant 4π/5 TM010-mode driven by a klystron. The absence of any external magnetic field for generating the plasma is suitable for cleaning cavities installed in a complex cryomodule assembly. The procedures developed in these experimental investigations can be applied to any complex cavity structure. Details of these experimental measurements and the observations are discussed in the paper.

  18. RF Electron Gun with Driven Plasma Cathode

    CERN Document Server

    Khodak, Igor

    2005-01-01

    It's known that RF guns with plasma cathodes based on solid-state dielectrics are able to generate an intense electron beam. In this paper we describe results of experimental investigation of the single cavity S-band RF gun with driven plasma cathode. The experimental sample of the cathode based on ferroelectric ceramics has been designed. Special design of the cathode permits to separate spatially processes of plasma development and electron acceleration. It has been obtained at RF gun output electron beam with particle energy ~500 keV, pulse current of 4 A and pulse duration of 80 ns. Results of experimental study of beam parameters are referred in. The gun is purposed to be applied as the intense electron beam source for electron linacs.

  19. Metal doped fluorocarbon polymer films prepared by plasma polymerization using an RF planar magnetron target

    International Nuclear Information System (INIS)

    Biederman, H.; Holland, L.

    1983-01-01

    Fluorocarbon films have been prepared by plasma polymerization of CF 4 using an RF planar magnetron with an aluminium target. More than one order of magnitude higher deposition rate has been achieved in comparison with an r.f. diode system operated under similar conditions of monomer pressure and flow rate and power input. A glow discharge in a CF 4 [25%]-argon[75%] mixture was used to incorporate aluminium from a target electrode into the polymer films. The foregoing mixture and another based on CF 4 [87%]-argon[13%] were used in the RF discharge with a copper target. Some experiments with a gold target and pure CF 4 as the inlet gas were also made. The film structure was examined by SEM and TEM and characteristic micrographs are presented here. The composition of the films was estimated from an EAS study. The sheet resistivity of the metal/polymer film complexes was determined. (orig.)

  20. Metal doped fluorocarbon polymer films prepared by plasma polymerization using an RF planar magnetron target

    Energy Technology Data Exchange (ETDEWEB)

    Biederman, H.; Holland, L. (Sussex Univ., Brighton (UK). Lab. for Plasma Materials Processing)

    1983-07-01

    Fluorocarbon films have been prepared by plasma polymerization of CF/sub 4/ using an RF planar magnetron with an aluminium target. More than one order of magnitude higher deposition rate has been achieved in comparison with an R.F. diode system operated under similar conditions of monomer pressure and flow rate and power input. A glow discharge in a CF/sub 4/(25%)-argon(75%) mixture was used to incorporate aluminium from a target electrode into the polymer films. The foregoing mixture and another based on CF/sub 4/(87%)-argon(13%) were used in the RF discharge with a copper target. Some experiments with a gold target and pure CF/sub 4/ as the inlet gas were also made. The film structure was examined by SEM and TEM and characteristic micrographs are presented here. The composition of the films was estimated from an EAS study. The sheet resistivity of the metal/polymer film complexes was determined.

  1. RF plasma production and heating below ion-cyclotron frequencies in Uragan torsatrons

    International Nuclear Information System (INIS)

    Moiseenko, V.E.; Berezhnyj, V.L.; Bondarenko, V.N.; Burchenko, P.Ya.; Chechkin, V.V.; Chernyshenko, V.Ya.; Dreval, M.B.; Garkusha, I.E.; Glazunov, G.P.; Grigor'eva, L.I.; Konovalov, V.G.; Kotsubanov, V.D.; Kramskoi, Ye.D.; Kulaga, A.E.; Lozin, A.V.; Castejon, F.; Hidalgo, C.; Hartmann, D.; Koch, R.; Lyssoivan, A.I.

    2011-01-01

    In the IPP-Kharkiv there are two torsatrons (stellarators) in operation, and in both of them Alfven resonance heating under high-k || conditions is used. This method of heating is advantageous for small-size devices, since in contrast to the minority and second-harmonic heating it can be realized at lower plasma densities. A series of experiments has been performed at the Uragan-3M torsatron with an aim to investigate the features of the discharge with a three-half-turn antenna. Electron temperatures in the T-bar = 0.2-0.5 keV range are achieved at plasma densities n-bar e approx. (0.5-1.5) x 10 13 cm -3 . The plasma energy content has increased by a factor of 2 with respect to the plasma produced with the frame antenna. A new four-strap shielded antenna has been manufactured and installed in the Uragan-2M. A high-frequency discharge for wall conditioning is introduced in the Uragan-2M torsatron. The discharge is sustained by a specially designed small frame antenna, and efficient hydrogen dissociation is achieved. A self-consistent model has been developed for simulation of plasma production in ICRF. The model includes a set of particle and energy-balance equations for the electrons, and the boundary problem for the Maxwell equations. The first calculation results on RF plasma production in the Uragan-2M stellarator with the frame-type antenna are presented.

  2. Dust-acoustic instability in an inductive gas-discharge plasma

    International Nuclear Information System (INIS)

    Zobnin, A.V.; Usachev, A.D.; Petrov, O.F.; Fortov, V.E.

    2002-01-01

    Spontaneous excitation of a dust-particle density wave is observed in a dust cloud levitating in the region of the diffused edge of an rf inductive low-pressure gas-discharge plasma. The main physical parameters of this wave and of the background plasma are measured. The analytic model proposed for the observed phenomenon is based on the theory of dust sound and successfully correlates with experimental data in a wide range of experimental conditions. The effect of variable charge of dust particles on the evolution of the observed dust-plasma instability is studied analytically. It is shown that the necessary condition for the development of the dust-acoustic instability is the presence of a dc electric field in the dust cloud region

  3. Effect of the radio frequency discharge on the dust charging process in a weakly collisional and fully ionized plasma

    Energy Technology Data Exchange (ETDEWEB)

    Motie, Iman [Department of Physics, Mashhad Branch, Islamic Azad University, Mashhad (Iran, Islamic Republic of); Bokaeeyan, Mahyar, E-mail: Mehyar9798@gmail.com [Department of Engineering, University of Applied Science and Technology (UAST)-Mohandesan Center, Mashhad (Iran, Islamic Republic of)

    2015-02-15

    A close analysis of dust charging process in the presence of radio frequency (RF) discharge on low pressure and fully ionized plasma for both weak and strong discharge's electric field is considered. When the electromagnetic waves pass throughout fully ionized plasma, the collision frequency of the plasma is derived. Moreover, the disturbed distribution function of plasma particles in the presence of the RF discharge is obtained. In this article, by using the Krook model, we separate the distribution function in two parts, the Maxwellian part and the perturbed part. The perturbed part of distribution can make an extra current, so-called the accretion rate of electron (or ion) current, towards a dust particle as a function of the average electron-ion collision frequency. It is proven that when the potential of dust grains increases, the accretion rate of electron current experiences an exponential reduction. Furthermore, the accretion rate of electron current for a strong electric field is relatively smaller than that for a weak electric field. The reasons are elaborated.

  4. A prototype of an electric-discharge gas flow oxygen−iodine laser: I. Modeling of the processes of singlet oxygen generation in a transverse cryogenic slab RF discharge

    Energy Technology Data Exchange (ETDEWEB)

    Vagin, N. P.; Ionin, A. A., E-mail: aion@sci.lebedev.ru; Kochetov, I. V.; Napartovich, A. P.; Sinitsyn, D. V., E-mail: dsinit@sci.lebedev.ru; Yuryshev, N. N. [Russian Academy of Sciences, Lebedev Physical Institute (Russian Federation)

    2017-03-15

    The existing kinetic model describing self-sustained and electroionization discharges in mixtures enriched with singlet oxygen has been modified to calculate the characteristics of a flow RF discharge in molecular oxygen and its mixtures with helium. The simulations were performed in the gas plug-flow approximation, i.e., the evolution of the plasma components during their motion along the channel was represented as their evolution in time. The calculations were carried out for the O{sub 2}: He = 1: 0, 1: 1, 1: 2, and 1: 3 mixtures at an oxygen partial pressure of 7.5 Torr. It is shown that, under these conditions, volumetric gas heating in a discharge in pure molecular oxygen prevails over gas cooling via heat conduction even at an electrode temperature as low as ~100 K. When molecular oxygen is diluted with helium, the behavior of the gas temperature changes substantially: heat removal begins to prevail over volumetric gas heating, and the gas temperature at the outlet of the discharge zone drops to ~220–230 K at room gas temperature at the inlet, which is very important in the context of achieving the generation threshold in an electric-discharge oxygen−iodine laser based on a slab cryogenic RF discharge.

  5. A prototype of an electric-discharge gas flow oxygen−iodine laser: I. Modeling of the processes of singlet oxygen generation in a transverse cryogenic slab RF discharge

    International Nuclear Information System (INIS)

    Vagin, N. P.; Ionin, A. A.; Kochetov, I. V.; Napartovich, A. P.; Sinitsyn, D. V.; Yuryshev, N. N.

    2017-01-01

    The existing kinetic model describing self-sustained and electroionization discharges in mixtures enriched with singlet oxygen has been modified to calculate the characteristics of a flow RF discharge in molecular oxygen and its mixtures with helium. The simulations were performed in the gas plug-flow approximation, i.e., the evolution of the plasma components during their motion along the channel was represented as their evolution in time. The calculations were carried out for the O 2 : He = 1: 0, 1: 1, 1: 2, and 1: 3 mixtures at an oxygen partial pressure of 7.5 Torr. It is shown that, under these conditions, volumetric gas heating in a discharge in pure molecular oxygen prevails over gas cooling via heat conduction even at an electrode temperature as low as ~100 K. When molecular oxygen is diluted with helium, the behavior of the gas temperature changes substantially: heat removal begins to prevail over volumetric gas heating, and the gas temperature at the outlet of the discharge zone drops to ~220–230 K at room gas temperature at the inlet, which is very important in the context of achieving the generation threshold in an electric-discharge oxygen−iodine laser based on a slab cryogenic RF discharge.

  6. Study of effect of grain size on dust charging in an RF plasma using three-dimensional PIC-MCC simulations

    International Nuclear Information System (INIS)

    Ikkurthi, V. R.; Melzer, A.; Matyash, K.; Schneider, R.

    2008-01-01

    A 3-dimensional Particle-Particle Particle-Mesh (P 3 M) code is applied to study the charging process of micrometer size dust grains confined in a capacitive RF discharge. In our model, particles (electrons and ions) are treated kinetically (Particle-in-Cell with Monte Carlo Collisions (PIC-MCC)). In order to accurately resolve the plasma particles' motion close to the dust grain, the PIC technique is supplemented with Molecular Dynamics (MD), employing an an analytic electrostatic potential for the interaction with the dust grain. This allows to self-consistently resolve the dust grain charging due to absorption of plasma electrons and ions. The charging of dust grains confined above lower electrode in a capacitive RF discharge and its dependence on the size and position of the dust is investigated. The results have been compared with laboratory measurements

  7. RF-Plasma Source Commissioning in Indian Negative Ion Facility

    International Nuclear Information System (INIS)

    Singh, M. J.; Bandyopadhyay, M.; Yadava, Ratnakar; Chakraborty, A. K.; Bansal, G.; Gahlaut, A.; Soni, J.; Kumar, Sunil; Pandya, K.; Parmar, K. G.; Sonara, J.; Kraus, W.; Heinemann, B.; Riedl, R.; Obermayer, S.; Martens, C.; Franzen, P.; Fantz, U.

    2011-01-01

    The Indian program of the RF based negative ion source has started off with the commissioning of ROBIN, the inductively coupled RF based negative ion source facility under establishment at Institute for Plasma research (IPR), India. The facility is being developed under a technology transfer agreement with IPP Garching. It consists of a single RF driver based beam source (BATMAN replica) coupled to a 100 kW, 1 MHz RF generator with a self excited oscillator, through a matching network, for plasma production and ion extraction and acceleration. The delivery of the RF generator and the RF plasma source without the accelerator, has enabled initiation of plasma production experiments. The recent experimental campaign has established the matching circuit parameters that result in plasma production with density in the range of 0.5-1x10 18 /m 3 , at operational gas pressures ranging between 0.4-1 Pa. Various configurations of the matching network have been experimented upon to obtain a stable operation of the set up for RF powers ranging between 25-85 kW and pulse lengths ranging between 4-20 s. It has been observed that the range of the parameters of the matching circuit, over which the frequency of the power supply is stable, is narrow and further experiments with increased number of turns in the coil are in the pipeline to see if the range can be widened. In this paper, the description of the experimental system and the commissioning data related to the optimisation of the various parameters of the matching network, to obtain stable plasma of required density, are presented and discussed.

  8. RF-Plasma Source Commissioning in Indian Negative Ion Facility

    Science.gov (United States)

    Singh, M. J.; Bandyopadhyay, M.; Bansal, G.; Gahlaut, A.; Soni, J.; Kumar, Sunil; Pandya, K.; Parmar, K. G.; Sonara, J.; Yadava, Ratnakar; Chakraborty, A. K.; Kraus, W.; Heinemann, B.; Riedl, R.; Obermayer, S.; Martens, C.; Franzen, P.; Fantz, U.

    2011-09-01

    The Indian program of the RF based negative ion source has started off with the commissioning of ROBIN, the inductively coupled RF based negative ion source facility under establishment at Institute for Plasma research (IPR), India. The facility is being developed under a technology transfer agreement with IPP Garching. It consists of a single RF driver based beam source (BATMAN replica) coupled to a 100 kW, 1 MHz RF generator with a self excited oscillator, through a matching network, for plasma production and ion extraction and acceleration. The delivery of the RF generator and the RF plasma source without the accelerator, has enabled initiation of plasma production experiments. The recent experimental campaign has established the matching circuit parameters that result in plasma production with density in the range of 0.5-1×1018/m3, at operational gas pressures ranging between 0.4-1 Pa. Various configurations of the matching network have been experimented upon to obtain a stable operation of the set up for RF powers ranging between 25-85 kW and pulse lengths ranging between 4-20 s. It has been observed that the range of the parameters of the matching circuit, over which the frequency of the power supply is stable, is narrow and further experiments with increased number of turns in the coil are in the pipeline to see if the range can be widened. In this paper, the description of the experimental system and the commissioning data related to the optimisation of the various parameters of the matching network, to obtain stable plasma of required density, are presented and discussed.

  9. Laser diagnostics of atomic hydrogen and oxygen production in rf and microwave plasma discharges

    International Nuclear Information System (INIS)

    Preppernau, B.L.

    1993-01-01

    The research for this thesis involved the application of two-photon allowed laser-induced fluorescence (TALIF) to the study of atomic hydrogen and oxygen production in industrial scale radio-frequency and microwave plasma discharge apparatus. Absolute atomic hydrogen concentration profiles were measured in a Gaseous Electronics Conference Reference Cell installed at Wright-Patterson AFB, Ohio operating with a simple H 2 discharge. Two-dimensional atomic hydrogen concentration profiles were also measured in an ASTEX HPMM microwave plasma diamond deposition reactor during actual diamond growth. In addition absolute atomic oxygen concentrations were measured in the ASTEX system. Particular attention as paid to refining the concentration calibration technique and in determining a correction to account for the collisional quenching of excited state fluorescence in high pressure gases

  10. The back-diffusion effect of air on the discharge characteristics of atmospheric-pressure radio-frequency glow discharges using bare metal electrodes

    International Nuclear Information System (INIS)

    Sun Wenting; Liang Tianran; Wang Huabo; Li Heping; Bao Chengyu

    2007-01-01

    Radio-frequency (RF), atmospheric-pressure glow discharge (APGD) plasmas using bare metal electrodes have promising prospects in the fields of plasma-aided etching, deposition, surface treatment, disinfection, sterilization, etc. In this paper, the discharge characteristics, including the breakdown voltage and the discharge voltage for sustaining a stable and uniform α mode discharge of the RF APGD plasmas are presented. The experiments are conducted by placing the home-made planar-type plasma generator in ambient and in a vacuum chamber, respectively, with helium as the primary plasma-forming gas. When the discharge processes occur in ambient, particularly for the lower plasma-working gas flow rates, the experimental measurements show that it is the back-diffusion effect of air in atmosphere, instead of the flow rate of the gas, that results in the obvious decrease in the breakdown voltage with increasing plasma-working gas flow rate. Further studies on the discharge characteristics, e.g. the luminous structures, the concentrations and distributions of chemically active species in plasmas, with different plasma-working gases or gas mixtures need to be conducted in future work

  11. Discharge physics and chemistry of a novel atmospheric pressure plasma source

    Energy Technology Data Exchange (ETDEWEB)

    Park, J.; Henins, I.; Hermann, J.W.; Selwyn, G.S.; Jeong, J.Y.; Hickis, R.

    1999-07-01

    The atmospheric pressure plasma jet (APPJ) is a unique plasma source operating at atmospheric pressure. The APPJ operates with RF power and produces a stable non-thermal discharge in capacitively-coupled configuration. The discharge is spatially and temporally homogeneous and provides a unique gas phase chemistry that is well suited for various applications including etching, film deposition, surface treatment and decontamination of chemical and biological warfare (CBW) agents. A theoretical model shows electron densities of 0.2--2 x 10{sup 11} cm{sup {minus}3} for a helium discharge at a power level of 3--30 W cm{sup {minus}3}. The APPJ also produces a large flux, equivalent of up to 10,000 monolayer s{sup {minus}1}, of chemically-active, atomic and metastable molecular species which can impinge surfaces several cm downstream of the confined source. In addition, the efforts are in progress to measure the electron density using microwave diagnostics and to benchmark the gas phase chemical model by using LIF and titration.

  12. RF compensation of single Langmuir probe in low density helicon plasma

    Energy Technology Data Exchange (ETDEWEB)

    Ghosh, Soumen, E-mail: soumen@ipr.res.in; Chattopadhyay, Prabal K.; Ghosh, Joydeep; Bora, Dhiraj

    2016-11-15

    Highlights: • Appropriate density and temperature measurement with Langmuir probe in RF Eenvironment. • Necessity of large auxiliary electrode for RF compensation at low densities (∼10{sup 16} m{sup −3}). • Measured two temperature electrons in low pressure helicon antenna produced RF plasma. • Tail electrons are localized only at off-axis in our cylindrical plasma system. - Abstract: Interpretations of Single Langmuir probe measurements in electrode-less radio frequency (RF) plasmas are noteworthy tricky and require adequate compensation of RF. Conventional RF compensation technique is limited only at high density (>10{sup 17} m{sup −3}) RF plasmas. RF compensation of single Langmuir probe at low density RF plasmas (∼10{sup 16} m{sup −3}) is presented in this paper. In RF driven plasmas, where the RF voltage is high (∼50 V) and density is in the range (∼10{sup 16} m{sup −3}), the primary RF compensation condition (Z{sub ck} > >Z{sub sh}) is very difficult to fulfill, because of high sheath impedance (Z{sub sh}) at 13.56 MHz and the construction limitation of a self-resonant tiny chock (Z{sub ck}) with very high impedance. Introducing a large auxiliary electrode (A{sub x}), (A{sub x} >>> A{sub p}), close to the small Langmuir probe (A{sub p}) tip, connected in parallel with probe via a coupling capacitor (C{sub cp}), significantly reduces the effective sheath impedance (Z{sub sh}) and allows probe bias to follow the RF oscillation. Dimensional requirements of the auxiliary electrode and the role of suitable coupling capacitor are discussed in this paper. Observations show proper compensation leads to estimation of more positive floating potentials and lower electron temperatures compared to uncompensated probe. The electron energy probability function (EEPF) is also obtained by double differentiating the collected current with respect to the applied bias voltage using an active analog circuit.

  13. Development of an rf-driven plasma neutralizer for negative ions

    International Nuclear Information System (INIS)

    Moses, K.G.

    1989-01-01

    The assertion that beams of negative ions can be neutralized more efficiently by impacting a plasma, rather than a cold gas target, is confirmed scientifically by the work of K.H. Berkner et al. What remains to be done is the realization of practical means of generating plasmas efficiently with appropriate integrated line densities (target thickness). The work performed by JAYCOR, under this grant, over the past few years has made significant progress towards that goal. In this work, large volumes of plasma are generated using low-frequency pulsed inductive rf discharges within a ring cusp multipole-magnetic field geometry. These plasmas exhibit sufficient line-integrated electron densities and degrees of ionization to neutralize beams of energetic negative ions whose energies exceed 500 keV. The method of plasma generation and the cell configuration used in these studies are directly applicable to higher energy neutral beam injector systems (NBIS). Innate scalability and modularity of the system design facilitates linear stacking to achieve a desired target thickness. Further, the plasma formation process is accomplished with an electrical economy consistent with increased overall electrical efficiency of the NBIS compared to that possible using a cold gas target. 5 refs., 16 figs

  14. Conductivity of rf-heated plasma

    International Nuclear Information System (INIS)

    Fisch, N.J.

    1984-05-01

    The electron velocity distribution of rf-heated plasma may be so far from Maxwellian that Spitzer conductivity no longer holds. A new conductivity for such plasmas is derived and the result can be put in a remarkably general form. The new expression should be of great practical value in examining schemes for current ramp-up in tokamaks by means of lower-hybrid or other waves

  15. Electrical and optical characteristics of the radio frequency surface dielectric barrier discharge plasma actuation

    International Nuclear Information System (INIS)

    Wang Wei-Long; Song Hui-Min; Li Jun; Jia Min; Wu Yun; Jin Di

    2016-01-01

    Electrical characteristics and optical emission spectrum of the radio frequency (RF) surface dielectric barrier discharge (SDBD) plasma actuation are investigated experimentally in this paper. Influences of operating pressure, duty cycle and load power on the discharge are analyzed. When the operating pressure reaches 30 kPa, the discharge energy calculated from the Charge–Voltage (Q–V) Lissajous figure increases significantly, while the effective capacitance decreases remarkably. As the duty cycle of the applied voltage increases, the voltage–current waveforms, the area of Q–V loop and the capacity show no distinct changes. Below 40 W, effective capacitance increases with the increase of load power, but it almost remains unchanged when load power is between 40 W and 95 W. The relative intensity changes little as the operating pressure varies from 4 kPa to 100 kPa, while it rises evidently with the pressure below 4 kPa, which indicates that the RF discharge mode shifts from filamentary discharge to glow discharge at around 4 kPa. With the increase of load power, the relative intensity rises evidently. Additionally, the relative intensity is insensitive to the pressure, the duty cycle, and the load power. (paper)

  16. Effects of an RF limiter on TEXTOR's edge plasmas

    International Nuclear Information System (INIS)

    Boedo, J.A.; Sakawa, Y.; Gray, D.S.; Mank, G.; Noda, N.

    1997-01-01

    Studies directed towards the reduction of particle and heat fluxes to plasma facing components by the application of ponderomotive forces generated by radio frequency (RF) are being conducted in TEXTOR. A modified poloidal limiter is used as an antenna with up to 3 kW of RF power; the data obtained show that the plasma is repelled by the RF ponderomotive potential. The density is reduced by a factor of 2-4 and the radial decay length is substantially altered. The density near the limiter decays exponentially with RF power. The electron temperature profile changes, with the decay length becoming longer (almost flat) during the RF. The temperature in the scrape off layer (SOL) increases and its increase is roughly proportional to the RF power until it saturates, suggesting that the heating efficiency drops with power, and that improved performance is to be expected at higher powers. (orig.)

  17. Effects of assistant anode on planar inductively coupled magnetized argon plasma in plasma immersion ion implantation

    International Nuclear Information System (INIS)

    Tang, Deli; Chu, Paul K.

    2003-01-01

    The enhancement of planar radio frequency (RF) inductively coupled argon plasma is studied in the presence of an assistant anode and an external magnetic field at low pressure. The influence of the assistant anode and magnetic field on the efficiency of RF power absorption and plasma parameters is investigated. An external axial magnetic field is coupled into the plasma discharge region by an external electromagnetic coil outside the discharge chamber and an assistant cylindrical anode is inserted into the discharge chamber to enhance the plasma discharge. The plasma parameters and density profile are measured by an electrostatic Langmuir probe at different magnetic fields and anode voltages. The RF power absorption by the plasma can be effectively enhanced by the external magnetic field compared with the nonmagnetized discharge. The plasma density can be further increased by the application of a voltage to the assistant anode. Owing to the effective power absorption and enhanced plasma discharge by the assistant anode in a longitudinal magnetic field, the plasma density can be enhanced by more than a factor of two. Meanwhile, the nonuniformity of the plasma density is less than 10% and it can be achieved in a process chamber with a diameter of 600 mm

  18. Energy confinement in the torsatron URAGAN-3M during the rf-heating mode

    International Nuclear Information System (INIS)

    Pashnev, V.K.; Burchenko, P.Ya.; Lozin, A.V. and others

    2008-01-01

    Energy confinement time of plasma in torsatron U-3M was measured both during quasi-stationary study of RF-discharge and after RF-power cut-off. Power absorbed by plasma in the confinement region was estimated. A mechanism which explain the plasma density behavior in the confinement region is proposed

  19. Measurement of plasma-surface energy fluxes in an argon rf-discharge by means of calorimetric probes and fluorescent microparticles

    International Nuclear Information System (INIS)

    Maurer, H. R.; Kersten, H.; Hannemann, M.; Basner, R.

    2010-01-01

    Measured energy influx densities toward a tungsten dummy substrate in an argon rf-plasma are presented and a model for the description of the energy influx density based on plasma parameters, which have been obtained by Langmuir probe measurements, is applied. Furthermore, temperature measurements of microparticles are presented, which are confined in the plasma sheath. An extension of the model is developed for the description of the energy influx density to the particles. The comparison of model and experimental results offer the possibility to obtain an improved understanding of plasma-surface interactions.

  20. Resonant-frequency discharge in a multi-cell radio frequency cavity

    International Nuclear Information System (INIS)

    Popović, S.; Upadhyay, J.; Nikolić, M.; Vušković, L.; Mammosser, J.

    2014-01-01

    We are reporting experimental results on a microwave discharge operating at resonant frequency in a multi-cell radio frequency (RF) accelerator cavity. Although the discharge operated at room temperature, the setup was constructed so that it could be used for plasma generation and processing in fully assembled active superconducting radio-frequency cryo-module. This discharge offers a mechanism for removal of a variety of contaminants, organic or oxide layers, and residual particulates from the interior surface of RF cavities through the interaction of plasma-generated radicals with the cavity walls. We describe resonant RF breakdown conditions and address the issues related to resonant detuning due to sustained multi-cell cavity plasma. We have determined breakdown conditions in the cavity, which was acting as a plasma vessel with distorted cylindrical geometry. We discuss the spectroscopic data taken during plasma removal of contaminants and use them to evaluate plasma parameters, characterize the process, and estimate the volatile contaminant product removal

  1. Resonant-frequency discharge in a multi-cell radio frequency cavity

    Energy Technology Data Exchange (ETDEWEB)

    Popovic, S; Upadhyay, J; Mammosser, J; Nikolic, M; Vuskovic, L

    2014-11-07

    We are reporting experimental results on microwave discharge operating at resonant frequency in a multi-cell radio frequency (RF) accelerator cavity. Although the discharge operated at room temperature, the setup was constructed so that it could be used for plasma generation and processing in fully assembled active superconducting radio-frequency (SRF) cryomodule (in situ operation). This discharge offers an efficient mechanism for removal of a variety of contaminants, organic or oxide layers, and residual particulates from the interior surface of RF cavities through the interaction of plasma-generated radicals with the cavity walls. We describe resonant RF breakdown conditions and address the problems related to generation and sustaining the multi-cell cavity plasma, which are breakdown and resonant detuning. We have determined breakdown conditions in the cavity, which was acting as a plasma vessel with distorted cylindrical geometry. We discuss the spectroscopic data taken during plasma removal of contaminants and use them to evaluate plasma parameters, characterize the process, and estimate the volatile contaminant product removal.

  2. Discharge regimes and density jumps in a helicon plasma source

    International Nuclear Information System (INIS)

    Shinohara, S.; Yonekura, K.

    1999-01-01

    A high density plasma source using a helicon wave is becoming very attractive in plasma processing and confinement devices. In the previous work, the characteristics of this wave and plasma performance with diameters of 5 and 45 cm have been studied, and the helicon wave was only observed after the density jump. Recently, density jumps from the low to high electron densities with a level of 10 13 cm -3 were investigated by changing the antenna wavenumber spectrum, and the obtained results were compared with the inductively coupled plasma (ICP). However, the mechanisms of density jumps and plasma production are still open questions to be answered. Here, the authors try to investigate the discharge regimes and density jumps in a helicon plasma source, by changing the antenna wavenumber spectrum. For he case of the parallel current directions in the antenna, where the low wavenumber spectrum part is large, the density jump was observed with the low RF input power of P in < 300 W regardless of the magnetic field. On the other hand, for the case of the opposite directions, where the low wavenumber spectrum part is small, the threshold power to obtain the jump became high with the increase in the magnetic field. This can be understood from the dispersion relation of the helicon wave. The wave structures and the dispersion relations in the discharge modes will be also shown

  3. Influence of operating parameters on surface properties of RF glow discharge oxygen plasma treated TiO{sub 2}/PET film for biomedical application

    Energy Technology Data Exchange (ETDEWEB)

    Pandiyaraj, K. Navaneetha, E-mail: dr.knpr@gmail.com [Surface Engineering Laboratory, Department of Physics, Sri Shakthi Institute of Engineering and Technology, L and T by pass, Chinniyam Palayam (post), Coimbatore 641062 (India); Deshmukh, R.R. [Department of Physics, Institute of Chemical Technology, Matunga, Mumbai 400 019 (India); Mahendiran, R. [Surface Engineering Laboratory, Department of Physics, Sri Shakthi Institute of Engineering and Technology, L and T by pass, Chinniyam Palayam (post), Coimbatore 641062 (India); Su, Pi-G [Department of Chemistry, Chinese Culture University, Taipei 111, Taiwan (China); Yassitepe, Emre; Shah, Ismat [Department of Physics and Astronomy, Department of Materials Science and Engineering, University of Delaware, 208 Dupont Hall, Newark (United States); Perni, Stefano [School of Pharmacy and Pharmaceutical Sciences, Cardiff University, Cardiff (United Kingdom); Prokopovich, Polina [School of Pharmacy and Pharmaceutical Sciences, Cardiff University, Cardiff (United Kingdom); Institute of Medical Engineering and Medical Physics, School of Engineering, Cardiff University (United Kingdom); Nadagouda, Mallikarjuna N., E-mail: Nadagouda.Mallikarjuna@epamail.epa.gov [The U.S. Environmental Protection Agency, ORD, NRMRL, WSWRD, 26W. Martin Luther King Drive, Cincinnati, OH 45268 (United States)

    2014-03-01

    In this paper, a thin transparent titania (TiO{sub 2}) film was coated on the surface of flexible poly(ethylene terephthalate) (PET) film using the sol–gel method. The surface properties of the obtained TiO{sub 2}/PET film were further improved by RF glow discharge oxygen plasma as a function of exposure time and discharge power. The changes in hydrophilicity of TiO{sub 2}/PET films were analyzed by contact angle measurements and surface energy. The influence of plasma on the surface of the TiO{sub 2}/PET films was analyzed by atomic force microscopy (AFM) as well as the change in chemical state and composition that were investigated by X-ray photo electron spectroscopy (XPS). The cytotoxicity of the TiO{sub 2}/PET films was analyzed using human osteoblast cells and the bacterial eradication behaviors of TiO{sub 2}/PET films were also evaluated against Staphylococcus bacteria. It was found that the surface roughness and incorporation of oxygen containing polar functional groups of the plasma treated TiO{sub 2}/PET films increased substantially as compared to the untreated one. Moreover the increased concentration of Ti{sup 3+} on the surface of plasma treated TiO{sub 2}/PET films was due to the transformation of chemical states (Ti{sup 4+} → Ti{sup 3+}). These morphological and chemical changes are responsible for enhanced hydrophilicity of the TiO{sub 2}/PET films. Furthermore, the plasma treated TiO{sub 2}/PET film exhibited no citotoxicity against osteoblast cells and antibacterial activity against Staphylococcus bacteria which can find application in manufacturing of biomedical devices. - Graphical abstract: Mechanism of plasma treatment on the surface of TiO{sub 2}/PET films. - Highlights: • Investigated the surface properties of TiO{sub 2}/PET films modified by O{sub 2} plasma • Studied the effect of operating parameters on surface properties of TiO{sub 2}/PET films • Mechanism of the plasma treatment on TiO{sub 2}/PET was clearly investigated.

  4. Revisiting the Anomalous rf Field Penetration into a Warm Plasma

    International Nuclear Information System (INIS)

    Kaganovich, Igor D.; Polomarov, Oleg V.; Theodosiou, Constantine E.

    2005-01-01

    Radio-frequency [rf] waves do not penetrate into a plasma and are damped within it. The electric field of the wave and plasma current are concentrated near the plasma boundary in a skin layer. Electrons can transport the plasma current away from the skin layer due to their thermal motion. As a result, the width of the skin layer increases when electron temperature effects are taken into account. This phenomenon is called anomalous skin effect. The anomalous penetration of the rf electric field occurs not only for transversely propagating to the plasma boundary wave (inductively coupled plasmas) but also for the wave propagating along the plasma boundary (capacitively coupled plasmas). Such anomalous penetration of the rf field modifies the structure of the capacitive sheath. Recent advances in the nonlinear, non-local theory of the capacitive sheath are reported. It is shown that separating the electric field profile into exponential and non-exponential parts yields an efficient qualitative and quantitative description of the anomalous skin effect in both inductively and capacitively coupled plasma

  5. Steady state plasma operation in RF dominated regimes on EAST

    Energy Technology Data Exchange (ETDEWEB)

    Zhang, X. J.; Zhao, Y. P.; Gong, X. Z.; Hu, C. D.; Liu, F. K.; Hu, L. Q.; Wan, B. N., E-mail: bnwan@ipp.ac.cn; Li, J. G. [Institute of Plasma Physics, Chinese Academy of Sciences, Hefei 230031 (China)

    2015-12-10

    Significant progress has recently been made on EAST in the 2014 campaign, including the enhanced CW H&CD system over 20MW heating power (LHCD, ICRH and NBI), more than 70 diagnostics, ITER-like W-monoblock on upper divertor, two inner cryo-pumps and RMP coils, enabling EAST to investigate long pulse H mode operation with dominant electron heating and low torque to address the critical issues for ITER. H-mode plasmas were achieved by new H&CD system or 4.6GHz LHCD alone for the first time. Long pulse high performance H mode has been obtained by LHCD alone up to 28s at H{sub 98}∼1.2 or by combing of ICRH and LHCD, no or small ELM was found in RF plasmas, which is essential for steady state operation in the future Tokamak. Plasma operation in low collision regimes were implemented by new 4.6GHz LHCD with core Te∼4.5keV. The non-inductive scenarios with high performance at high bootstrap current fraction have been demonstrated in RF dominated regimes for long pulse operation. Near full non-inductive CD discharges have been achieved. In addition, effective heating and decoupling method under multi-transmitter for ICRF system were developed in this campaign, etc. EAST could be in operation with over 30MW CW heating and current drive power (LHCD ICRH NBI and ECRH), enhanced diagnostic capabilities and full actively-cooled metal wall from 2015. It will therefore allow to access new confinement regimes and to extend these regimes towards to steady state operation.

  6. Preliminary results of a broad beam RF ion source with electron plasma interaction. Vol. 2

    Energy Technology Data Exchange (ETDEWEB)

    Abdelaziz, M E; Zakhary, S G; Ghanem, A A; Abdel-Ghaffar, A M [Ion Sources and Accelerators Department, Nuclear Research Center, Atomic Energy Authority, Cairo, (Egypt)

    1996-03-01

    A new design of a broad beam RF ion source is made to be capable to deliver wide and uniform beam with currents reaching (100 {mu} A up to 30 mA) at extraction voltages (200 V up to 2 kV). Its plasma intensifying system is made with the addition of electrons from an immersed filament in the discharge and axial magnetic field (70 up to 300 G). A uniform beam distribution is made with a planner graphite cathode which has a number of holes arranged to produce perveance matching with the normal Gaussian distribution of the beam density. These holes are arranged in a consequent orbits with equal distance between the adjacent holes in each orbit. These holes increase in diameter with increasing the orbit radius. This allows increasing the extracted ion currents at the source outer edges and decreases its value at the source inner region; producing wide and uniform beam which is suitable for material modifications. The beam profiles are traced with electromechanical scanner and X-Y recorder. The perveance matching is found to produce a beam uniformity of =66% of its width which reaches =6 cm. The variation of the output currents are with the variation of extraction voltages, magnetic field, discharge pressure and electron injection into the plasma. The extracted current increases with the increase of the discharge pressure, RF power and magnetic field intensity. The influence of electron plasma interaction is found to have a great effect on increasing the ion currents to about four times its value without electron interaction, however, this increase is limited due to presence of breakdown at V{sub ex} > 2 kV. The simple design of this source, its cleanness due to the use of pyrex discharge bottle, easy operation and maintenance adds other features to this broad beam type ion source which makes it suitable for metallurgical applications in broad beam accelerators. 6 figs.

  7. Review of the methods to form hydrogen peroxide in electrical discharge plasma with liquid water

    Science.gov (United States)

    Locke, Bruce R.; Shih, Kai-Yuan

    2011-06-01

    This paper presents a review of the literature dealing with the formation of hydrogen peroxide from plasma processes. Energy yields for hydrogen peroxide generation by plasma from water span approximately three orders of magnitude from 4 × 10-2 to 80 g kWh-1. A wide range of plasma processes from rf to pulsed, ac, and dc discharges directly in the liquid phase have similar energy yields and may thus be limited by radical quenching processes at the plasma-liquid interface. Reactor modification using discharges in bubbles and discharges over the liquid phase can provide modest improvements in energy yield over direct discharge in the liquid, but the interpretation is complicated by additional chemical reactions of gas phase components such as ozone and nitrogen oxides. The highest efficiency plasma process utilizes liquid water droplets that may enhance efficiency by sequestering hydrogen peroxide in the liquid and by suppressing decomposition reactions by radicals from the gas and at the interface. Kinetic simulations of water vapor reported in the literature suggest that plasma generation of hydrogen peroxide should approach 45% of the thermodynamics limit, and this fact coupled with experimental studies demonstrating improvements with the presence of the condensed liquid phase suggest that further improvements in energy yield may be possible. Plasma generation of hydrogen peroxide directly from water compares favorably with a number of other methods including electron beam, ultrasound, electrochemical and photochemical methods, and other chemical processes.

  8. Review of the methods to form hydrogen peroxide in electrical discharge plasma with liquid water

    Energy Technology Data Exchange (ETDEWEB)

    Locke, Bruce R; Shih, Kai-Yuan [Department of Chemical and Biomedical Engineering, Florida State University, Tallahassee, FL 32310 (United States)

    2011-06-15

    This paper presents a review of the literature dealing with the formation of hydrogen peroxide from plasma processes. Energy yields for hydrogen peroxide generation by plasma from water span approximately three orders of magnitude from 4 x 10{sup -2} to 80 g kWh{sup -1}. A wide range of plasma processes from rf to pulsed, ac, and dc discharges directly in the liquid phase have similar energy yields and may thus be limited by radical quenching processes at the plasma-liquid interface. Reactor modification using discharges in bubbles and discharges over the liquid phase can provide modest improvements in energy yield over direct discharge in the liquid, but the interpretation is complicated by additional chemical reactions of gas phase components such as ozone and nitrogen oxides. The highest efficiency plasma process utilizes liquid water droplets that may enhance efficiency by sequestering hydrogen peroxide in the liquid and by suppressing decomposition reactions by radicals from the gas and at the interface. Kinetic simulations of water vapor reported in the literature suggest that plasma generation of hydrogen peroxide should approach 45% of the thermodynamics limit, and this fact coupled with experimental studies demonstrating improvements with the presence of the condensed liquid phase suggest that further improvements in energy yield may be possible. Plasma generation of hydrogen peroxide directly from water compares favorably with a number of other methods including electron beam, ultrasound, electrochemical and photochemical methods, and other chemical processes.

  9. Comparative Analysis of Carbon Plasma in Arc and RF Reactors

    International Nuclear Information System (INIS)

    Todorovic-Markovic, B.; Markovic, Z.; Mohai, I.; Szepvolgyi, J.

    2004-01-01

    Results on studies of molecular spectra emitted in the initial stages of fullerene formation during the processing of graphite powder in induction RF reactor and evaporation of graphite electrodes in arc reactor are presented in this paper. It was found that C2 radicals were dominant molecular species in both plasmas. C2 radicals have an important role in the process of fullerene synthesis. The rotational-vibrational temperatures of C2 and CN species were calculated by fitting the experimental spectra to the simulated ones. The results of optical emission study of C2 radicals generated in carbon arc plasma have shown that rotational temperature of C2 species depends on carbon concentration and current intensity significantly. The optical emission study of induction RF plasma and SEM analysis of graphite powder before and after plasma treatment have shown that evaporation of the processed graphite powder depends on feed rate and composition of gas phase significantly. Based on the obtained results, it was concluded that in the plasma region CN radicals could be formed by the reaction of C2 species with atomic nitrogen at smaller loads. At larger feed rate of graphite powder, CN species were produced by surface reaction of the hot carbon particles with nitrogen atoms. The presence of nitrogen in induction RF plasma reduces the fullerene yield significantly. The fullerene yield obtained in two different reactors was: 13% in arc reactor and 4.1% in induction RF reactor. However, the fullerene production rate was higher in induction RF reactor-6.4 g/h versus 1.7 g/h in arc reactor

  10. Particle melting and particle/plasma interactions in DC and RF plasmas: a modeling study. (Volumes I and II)

    International Nuclear Information System (INIS)

    Wei, D.Y.C.

    1987-01-01

    Integral process models were developed to predict particle melting in both DC and RF plasmas. Specifically, a numerical model has been developed to predict the temperature history of particles injected in a low pressure DC plasma jet. The temperature and velocity fields of the plasma jet are predicted as a free jet by solving the parabolized Navier-Stokes equations using a spatial marching scheme. Correction factors were introduced to take into account non continuum effects encountered in the low pressure environment. The plasma jet profiles as well as the particle/plasma interactions under different jet pressure ratios (from underexpanded to overexpanded) were investigated. The flow and temperature fields in the RF plasma torch are calculated using the axisymmetric Navier-Stokes equations based on the primitive variables, along with pseudo two-dimensional electromagnetic field equations. Particle trajectories and heat transfer characteristics in both DC and RF plasmas are calculated using predicted plasma jet profiles. Particle melting efficiencies in both DC and RF plasmas are evaluated and compared using model alloy systems. Based on the theoretical considerations, an alternative route of plasma spraying process (hybrid plasma spraying process) is proposed. An evaluation of particle melting in hybrid plasma jets had indicated that further improvement in deposit properties could be made

  11. Langmuir probe study of a magnetically enhanced RF plasma source at pressures below 0.1 Pa

    Science.gov (United States)

    Kousal, Jaroslav; Tichý, Milan; Šebek, Ondřej; Čechvala, Juraj; Biederman, Hynek

    2011-08-01

    The majority of plasma polymerization sources operate at pressures higher than 1 Pa. At these pressures most common deposition methods do not show significant directionality. One way of enhancing the directional effects is to decrease the working pressure to increase the mean free path of the reactive molecules. The plasma source used in this work was designed to study the plasma polymerization process at pressures below 0.1 Pa. The source consists of the classical radio frequency (RF) (13.56 MHz, capacitive coupled) tubular reactor enhanced by an external magnetic circuit. The working gas is introduced into the discharge by a capillary. This forms a relatively localized zone of higher pressure where the monomer is activated. Due to the magnetic field, the plasma is constricted near the axis of the reactor with nearly collisionless gas flow. The plasma parameters were obtained using a double Langmuir probe. Plasma density in the range ni = 1013-1016 m-3 was obtained in various parts of the discharge under typical conditions. The presence of the magnetic field led to the presence of relatively strong electric fields (103 V m-1) and relatively high electron energies up to several tens of eV in the plasma.

  12. Langmuir probe study of a magnetically enhanced RF plasma source at pressures below 0.1 Pa

    Energy Technology Data Exchange (ETDEWEB)

    Kousal, Jaroslav; Tichy, Milan; Sebek, Ondrej; Cechvala, Juraj; Biederman, Hynek, E-mail: jaroslav.kousal@mff.cuni.cz [Charles University in Prague, Faculty of Mathematics and Physics, V Holesovickach 2, 180 00, Prague 8 (Czech Republic)

    2011-08-15

    The majority of plasma polymerization sources operate at pressures higher than 1 Pa. At these pressures most common deposition methods do not show significant directionality. One way of enhancing the directional effects is to decrease the working pressure to increase the mean free path of the reactive molecules. The plasma source used in this work was designed to study the plasma polymerization process at pressures below 0.1 Pa. The source consists of the classical radio frequency (RF) (13.56 MHz, capacitive coupled) tubular reactor enhanced by an external magnetic circuit. The working gas is introduced into the discharge by a capillary. This forms a relatively localized zone of higher pressure where the monomer is activated. Due to the magnetic field, the plasma is constricted near the axis of the reactor with nearly collisionless gas flow. The plasma parameters were obtained using a double Langmuir probe. Plasma density in the range n{sub i} = 10{sup 13}-10{sup 16} m{sup -3} was obtained in various parts of the discharge under typical conditions. The presence of the magnetic field led to the presence of relatively strong electric fields (10{sup 3} V m{sup -1}) and relatively high electron energies up to several tens of eV in the plasma.

  13. A 1D ion species model for an RF driven negative ion source

    Science.gov (United States)

    Turner, I.; Holmes, A. J. T.

    2017-08-01

    A one-dimensional model for an RF driven negative ion source has been developed based on an inductive discharge. The RF source differs from traditional filament and arc ion sources because there are no primary electrons present, and is simply composed of an antenna region (driver) and a main plasma discharge region. However the model does still make use of the classical plasma transport equations for particle energy and flow, which have previously worked well for modelling DC driven sources. The model has been developed primarily to model the Small Negative Ion Facility (SNIF) ion source at CCFE, but may be easily adapted to model other RF sources. Currently the model considers the hydrogen ion species, and provides a detailed description of the plasma parameters along the source axis, i.e. plasma temperature, density and potential, as well as current densities and species fluxes. The inputs to the model are currently the RF power, the magnetic filter field and the source gas pressure. Results from the model are presented and where possible compared to existing experimental data from SNIF, with varying RF power, source pressure.

  14. Rf-biasing of highly idealized plasmas

    NARCIS (Netherlands)

    Westermann, R.H.J.; Blauw, M.A.; Goedheer, W.J.; Sanden, van de M.C.M.; Schmidt, J.; Simek, M.; Pekarek, S.; Prukner, V.

    2007-01-01

    Remote plasmas, which are subjected to a radio-frequency (RF) biased surface, have been investigated theoretically and experimentally for decades. The relation between the complex power (DC) voltage characteristics, the ion energy distribution and control losses of the ion bombardment are of

  15. Plasma waves and electrical discharges stimulated by beam operations on a high altitude satellite

    International Nuclear Information System (INIS)

    Koons, H.C.; Cohen, H.A.

    1982-01-01

    A satellite experiment was conducted to measure the characteristics of the spacecraft charging process near synchronous orbit. The payload included a particle beam system (both an electron gun and an ion gun) and a charging electrical effects analyzer consisting of a pulse shape analyzer, a VLF analyzer, and an RF analyzer. The characteristics of plasma waves and electrical discharges measured by these instruments during electron and ion beam operations are discussed

  16. Modelling RF-plasma interaction in ECR ion sources

    Directory of Open Access Journals (Sweden)

    Mascali David

    2017-01-01

    Full Text Available This paper describes three-dimensional self-consistent numerical simulations of wave propagation in magnetoplasmas of Electron cyclotron resonance ion sources (ECRIS. Numerical results can give useful information on the distribution of the absorbed RF power and/or efficiency of RF heating, especially in the case of alternative schemes such as mode-conversion based heating scenarios. Ray-tracing approximation is allowed only for small wavelength compared to the system scale lengths: as a consequence, full-wave solutions of Maxwell-Vlasov equation must be taken into account in compact and strongly inhomogeneous ECRIS plasmas. This contribution presents a multi-scale temporal domains approach for simultaneously including RF dynamics and plasma kinetics in a “cold-plasma”, and some perspectives for “hot-plasma” implementation. The presented results rely with the attempt to establish a modal-conversion scenario of OXB-type in double frequency heating inside an ECRIS testbench.

  17. Studies on gas breakdown in pulsed radio frequency atmospheric pressure glow discharges

    International Nuclear Information System (INIS)

    Huo, W. G.; Jian, S. J.; Yao, J.; Ding, Z. F.

    2014-01-01

    In pulsed RF atmospheric pressure glow discharges, the gas breakdown judged by the rapid drop in the amplitude of the pulsed RF voltage is no longer universally true. The steep increment of the plasma-absorbed RF power is proposed to determine the gas breakdown. The averaged plasma-absorbed RF power over a pulse period is used to evaluate effects of the preceding pulsed RF discharge on the breakdown voltage of the following one, finding that the breakdown voltage decreases with the increment in the averaged plasma-absorbed RF power under constant pulse duty ratio. Effects of the pulse off-time on the breakdown voltage and the breakdown delay time are also studied. The obtained dependence of the breakdown voltage on the pulse off-time is indicative of the transitional plasma diffusion processes in the afterglow. The breakdown voltage varies rapidly as the plasma diffuses fast in the region of moderate pulse off-time. The contribution of nitrogen atom recombination at the alumina surface is demonstrated in the prolonged memory effect on the breakdown delay time vs. the pulse off-time and experimentally validated by introducing a trace amount of nitrogen into argon at short and long pulse off-times

  18. Coupling of RF antennas to large volume helicon plasma

    Directory of Open Access Journals (Sweden)

    Lei Chang

    2018-04-01

    Full Text Available Large volume helicon plasma sources are of particular interest for large scale semiconductor processing, high power plasma propulsion and recently plasma-material interaction under fusion conditions. This work is devoted to studying the coupling of four typical RF antennas to helicon plasma with infinite length and diameter of 0.5 m, and exploring its frequency dependence in the range of 13.56-70 MHz for coupling optimization. It is found that loop antenna is more efficient than half helix, Boswell and Nagoya III antennas for power absorption; radially parabolic density profile overwhelms Gaussian density profile in terms of antenna coupling for low-density plasma, but the superiority reverses for high-density plasma. Increasing the driving frequency results in power absorption more near plasma edge, but the overall power absorption increases with frequency. Perpendicular stream plots of wave magnetic field, wave electric field and perturbed current are also presented. This work can serve as an important reference for the experimental design of large volume helicon plasma source with high RF power.

  19. Simulation study of wave phenomena from the sheath region in single frequency capacitively coupled plasma discharges; field reversals and ion reflection

    Energy Technology Data Exchange (ETDEWEB)

    Sharma, S.; Turner, M. M. [National Centre for Plasma Science and Technology, School of Physical Sciences, Dublin City University, Dublin 9 (Ireland)

    2013-07-15

    Capacitively coupled radio-frequency (RF) discharges have great significance for industrial applications. Collisionless electron heating in such discharges is important, and sometimes is the dominant mechanism. This heating is usually understood to originate in a stochastic interaction between electrons and the electric fields. However, other mechanisms may also be important. There is evidence of wave emission with a frequency near the electron plasma frequency, i.e., ω{sub pe}, from the sheath region in collisionless capacitive RF discharges. This is the result of a progressive breakdown of quasi-neutrality close to the electron sheath edge. These waves are damped in a few centimeters during their propagation from the sheath towards the bulk plasma. The damping occurs because of the Landau damping or some related mechanism. This research work reports that the emission of waves is associated with a field reversal during the expanding phase of the sheath. Trapping of electrons near to this field reversal region is observed. The amplitude of the wave increases with increasing RF current density amplitude J(tilde sign){sub 0} until some maximum is reached, beyond which the wave diminishes and a new regime appears. In this new regime, the density of the bulk plasma suddenly increases because of ion reflection, which occurs due to the presence of strong field reversal near sheath region. Our calculation shows that these waves are electron plasma waves. These phenomena occur under extreme conditions (i.e., higher J(tilde sign){sub 0} than in typical experiments) for sinusoidal current waveforms, but similar effects may occur with non-sinusoidal pulsed waveforms for conditions of experimental interest, because the rate of change of current is a relevant parameter. The effect of electron elastic collisions on plasma waves is also investigated.

  20. Selection of suitable diagnostic techniques for an RF atmospheric pressure plasma

    International Nuclear Information System (INIS)

    Kong, M.G.; Deng, X.T.

    2001-01-01

    As an early report of our study, this paper summaries the RF atmospheric pressure plasma system we intend to characterize and a number of diagnostic techniques presently under assessment for our plasma rig. By discussing the advantages and disadvantages of these diagnostic techniques at this meeting, we hope to gain feedback and comments to improve our choice of appropriate diagnostic techniques as well as our subsequent application of these techniques to nonthermal RF atmospheric pressure plasmas

  1. Numerical simulation of atmospheric-pressure helium discharge driven by combined radio frequency and trapezoidal pulse sources

    International Nuclear Information System (INIS)

    Wang Qi; Sun Jizhong; Zhang Jianhong; Ding Zhenfeng; Wang Dezhen

    2010-01-01

    Atmospheric-pressure capacitive discharges driven by combined radio frequency (rf) and trapezoidal pulse sources are investigated using a one-dimensional self-consistent fluid model. The results show that the plasma intensity in the rf discharge can be enhanced drastically when a low duty ratio short pulse source is additionally applied. The mechanism for the increase in the plasma density can be attributed to a strong localized electric field induced by the applied short pulse; the strong electric field generates a great number of high energy electrons and chemically active particles, which subsequently generate more electrons and ions. The rf capacitive discharges with the aid of externally applied short pulses can achieve a high plasma density with better power efficiency.

  2. Radio frequency glow discharge source with integrated voltage and current probes used for evaluation of discharge parameters

    International Nuclear Information System (INIS)

    Wilken, L.; Hoffmann, V.; Wetzig, K.

    2006-01-01

    A radio frequency (rf) Grimm-type glow discharge source for the chemical analysis of solid samples, with integrated voltage and current probes, was developed. All elements of a plasma equivalent circuit are determined from the measured current-voltage characteristics. The procedure is based on the independent evaluation of the ion current and electron current region. The physical meaning of the parameters is investigated by comparisons with measurements from dc glow discharges. We found that the reduced rf current of the powered electrode is comparable to the reduced current in dc discharges. A formula is developed that corrects the reduced current due to gas heating. The sheath thickness at the powered rf electrode is evaluated and is between 75 and 1100 μm. The voltage of the bulk plasma is in the range 2-15 V, and the resistance is between 30 and 400 Ω. The bulk plasma consumes about 3% of the total power, and the reduced voltage is comparable to the reduced electrical field in the positive column of direct current discharges. The sheath voltage at the grounded electrode is in the range 25-100 V, the capacities are between 10 and 400 pF, and the resistances are in the range 100 Ω-5000 Ω. We also found invariants for the evaluated sheath parameters

  3. Process for titanium powders spheroidization by RF induction plasma

    International Nuclear Information System (INIS)

    Gu Zhongtao; Ye Gaoying; Liu Chuandong; Tong Honghui

    2010-01-01

    Spherical titanium (Ti) particles were obtained by the process of heating irregularly shaped Ti powders under the radio frequency induction plasma (RF induction plasma) condition. The effect of feed rate, various dispersion methods and Ti particle size on the spheroidization efficiency was studied. The efficiency of the spheroidization is evaluated through the measurements of the percentage of powder spheroidized based on the electron microscopic observations and the tap density measurement of the processed powder. During the short flight of the particles in the plasma flow, of the order of a few milliseconds, the individual titanium particles of the powder are heated and melt, forming a spherical liquid droplet which upon freezing gives rise to the formation of a perfectly dense spherical solid particle. So RF induction plasma is a promising method for the preparation of spherical titanium powders with high flow ability. (authors)

  4. Plasma diagnostics discharge parameters and chemistry

    CERN Document Server

    Auciello, Orlando

    1989-01-01

    Plasma Diagnostics, Volume 1: Discharge Parameters and Chemistry covers seven chapters on the important diagnostic techniques for plasmas and details their use in particular applications. The book discusses optical diagnostic techniques for low pressure plasmas and plasma processing; plasma diagnostics for electrical discharge light sources; as well as Langmuir probes. The text also describes the mass spectroscopy of plasmas, microwave diagnostics, paramagnetic resonance diagnostics, and diagnostics in thermal plasma processing. Electrical engineers, nuclear engineers, microwave engineers, che

  5. Plasma Discharge in Toroidal System

    International Nuclear Information System (INIS)

    Usada, Widdi; Suryadi; Purwadi, Agus; Kasiyo

    1996-01-01

    A toroidal discharge apparatus has been made as an initial research in magnetic confinement system. This system consists of a capacitor, a RF source, an igniter system, a primary coil, a torus, and completed by Rogowski probe as a current detector. In this system, the discharge occurs when the minimum voltage is operated at 5 kV. The experiment result shows that the coupling factor is 0.35, it is proved that there is an equality between estimated and measurement results of the primary inductance i.e 8.5 μH

  6. RF wave simulation for cold edge plasmas using the MFEM library

    Science.gov (United States)

    Shiraiwa, S.; Wright, J. C.; Bonoli, P. T.; Kolev, T.; Stowell, M.

    2017-10-01

    A newly developed generic electro-magnetic (EM) simulation tool for modeling RF wave propagation in SOL plasmas is presented. The primary motivation of this development is to extend the domain partitioning approach for incorporating arbitrarily shaped SOL plasmas and antenna to the TORIC core ICRF solver, which was previously demonstrated in the 2D geometry [S. Shiraiwa, et. al., "HISTORIC: extending core ICRF wave simulation to include realistic SOL plasmas", Nucl. Fusion in press], to larger and more complicated simulations by including a 3D realistic antenna and integrating RF rectified sheath potential model. Such an extension requires a scalable high fidelity 3D edge plasma wave simulation. We used the MFEM [http://mfem.org], open source scalable C++ finite element method library, and developed a Python wrapper for MFEM (PyMFEM), and then a radio frequency (RF) wave physics module in Python. This approach allows for building a physics layer rapidly, while separating the physics implementation being apart from the numerical FEM implementation. An interactive modeling interface was built on pScope [S Shiraiwa, et. al. Fusion Eng. Des. 112, 835] to work with an RF simulation model in a complicated geometry.

  7. Investigation of plasma potential and pulsed discharge characteristics in enhanced glow discharge plasma immersion ion implantation and deposition

    International Nuclear Information System (INIS)

    Li Liuhe; Lu Qiuyuan; Fu, Ricky K.Y.; Chu, Paul K.

    2009-01-01

    Enhanced glow discharge plasma immersion ion implantation and deposition (EGD-PII and D) does not require external plasma sources. In this technique, the plasma is produced by self-glow discharge when a high negative voltage is applied to the sample. The small-area, pointed-shape hollow anode and large area tabular cathode form an electron-focused electric field. Using a special electric field design, the electrons from either the plasma or target (secondary electrons) are focused to a special hollow anode. As a result of the special electron-focusing field, the self-glow discharge process can be enhanced to achieve effective ion implantation into the substrate. In this work, the plasma potential distribution is investigated in details and the possible pulse discharge mechanism is discussed. The unique characteristics of the pulsed plasma and plasma extinction are studied.

  8. Passive inference of collision frequency in magnetized capacitive argon discharge

    Science.gov (United States)

    Binwal, S.; Joshi, J. K.; Karkari, S. K.; Kaw, P. K.; Nair, L.

    2018-03-01

    A non-invasive method of determining the collision frequency νm by measuring the net plasma impendence in a magnetized, capacitive-coupled, radio-frequency (rf) discharge circuit is developed. The collision frequency has been analytically expressed in terms of bulk plasma reactance, wherein standard sheath models have been used to estimate the reactance offered due to the capacitive rf sheaths at the discharge plates. The experimental observations suggest that in the un-magnetized case, νm remains constant over a range of rf current but steadily increases as the background pressure reduces. In the magnetized case, the collision frequency has been observed to decay with the increase in rf current while it remains unaffected by the background pressure. A qualitative discussion has been presented to explain these characteristics.

  9. Physics-electrical hybrid model for real time impedance matching and remote plasma characterization in RF plasma sources.

    Science.gov (United States)

    Sudhir, Dass; Bandyopadhyay, M; Chakraborty, A

    2016-02-01

    Plasma characterization and impedance matching are an integral part of any radio frequency (RF) based plasma source. In long pulse operation, particularly in high power operation where plasma load may vary due to different reasons (e.g. pressure and power), online tuning of impedance matching circuit and remote plasma density estimation are very useful. In some cases, due to remote interfaces, radio activation and, due to maintenance issues, power probes are not allowed to be incorporated in the ion source design for plasma characterization. Therefore, for characterization and impedance matching, more remote schemes are envisaged. Two such schemes by the same authors are suggested in these regards, which are based on air core transformer model of inductive coupled plasma (ICP) [M. Bandyopadhyay et al., Nucl. Fusion 55, 033017 (2015); D. Sudhir et al., Rev. Sci. Instrum. 85, 013510 (2014)]. However, the influence of the RF field interaction with the plasma to determine its impedance, a physics code HELIC [D. Arnush, Phys. Plasmas 7, 3042 (2000)] is coupled with the transformer model. This model can be useful for both types of RF sources, i.e., ICP and helicon sources.

  10. Real time control of fully non-inductive operation in Tore Supra leading to 6 minutes, 1 giga-joule plasma discharges

    International Nuclear Information System (INIS)

    Van Houtte, D.; Martin, G.; Becoulet, A.; Saoutic, B.

    2004-01-01

    The experimental programme of Tore Supra (a = 0.72 m, R = 2.4 m, I p T < 4.5 T) has been devoted in 2003 to study simultaneously heat removal capability and particle exhaust in steady-state fully non-inductive current drive discharges. This required both advanced technology integration and steady-state real time plasma control. In particular, an improvement of the plasma position within a few millimetre range, and new real time cross controls between radio frequency (RF) power and various actuators built around a shared memory network, have allowed Tore Supra to access a powerful steady-state regime with an improved safety level for the actively cooled plasma facing components. Feedback controlled fully non-inductive plasma discharges have been sustained in a steady-state regime up to 6 minutes with a new world record of injected-extracted energy exceeding 1 GJ. Advanced tools, experimental results and brief physics analysis of these discharges are presented and discussed. (authors)

  11. Real time control of fully non-inductive operation in Tore Supra leading to 6 minutes, 1 giga-joule plasma discharges

    Energy Technology Data Exchange (ETDEWEB)

    Van Houtte, D.; Martin, G.; Becoulet, A.; Saoutic, B

    2004-07-01

    The experimental programme of Tore Supra (a = 0.72 m, R = 2.4 m, I{sub p} < 1.7 MA, B{sub T} < 4.5 T) has been devoted in 2003 to study simultaneously heat removal capability and particle exhaust in steady-state fully non-inductive current drive discharges. This required both advanced technology integration and steady-state real time plasma control. In particular, an improvement of the plasma position within a few millimetre range, and new real time cross controls between radio frequency (RF) power and various actuators built around a shared memory network, have allowed Tore Supra to access a powerful steady-state regime with an improved safety level for the actively cooled plasma facing components. Feedback controlled fully non-inductive plasma discharges have been sustained in a steady-state regime up to 6 minutes with a new world record of injected-extracted energy exceeding 1 GJ. Advanced tools, experimental results and brief physics analysis of these discharges are presented and discussed. (authors)

  12. RF current drive and plasma fluctuations

    International Nuclear Information System (INIS)

    Peysson, Yves; Decker, Joan; Morini, L; Coda, S

    2011-01-01

    The role played by electron density fluctuations near the plasma edge on rf current drive in tokamaks is assessed quantitatively. For this purpose, a general framework for incorporating density fluctuations in existing modelling tools has been developed. It is valid when rf power absorption takes place far from the fluctuating region of the plasma. The ray-tracing formalism is modified in order to take into account time-dependent perturbations of the density, while the Fokker–Planck solver remains unchanged. The evolution of the electron distribution function in time and space under the competing effects of collisions and quasilinear diffusion by rf waves is determined consistently with the time scale of fluctuations described as a statistical process. Using the ray-tracing code C3PO and the 3D linearized relativistic bounce-averaged Fokker–Planck solver LUKE, the effect of electron density fluctuations on the current driven by the lower hybrid (LH) and the electron cyclotron (EC) waves is estimated quantitatively. A thin fluctuating layer characterized by electron drift wave turbulence at the plasma edge is considered. The effect of fluctuations on the LH wave propagation is equivalent to a random scattering process with a broadening of the poloidal mode spectrum proportional to the level of the perturbation. However, in the multipass regime, the LH current density profile remains sensitive to the ray chaotic behaviour, which is not averaged by fluctuations. The effect of large amplitude fluctuations on the EC driven current is found to be similar to an anomalous radial transport of the fast electrons. The resulting lower current drive efficiency and broader current profile are in better agreement with experimental observations. Finally, applied to the ITER ELMy H-mode regime, the model predicts a significant broadening of the EC driven current density profile with the fluctuation level, which can make the stabilization of neoclassical tearing mode potentially

  13. Voltage uniformity study in large-area reactors for RF plasma deposition

    Energy Technology Data Exchange (ETDEWEB)

    Sansonnens, L.; Pletzer, A.; Magni, D.; Howling, A.A.; Hollenstein, C. [Ecole Polytechnique Federale, Lausanne (Switzerland). Centre de Recherche en Physique des Plasma (CRPP); Schmitt, J.P.M. [Balzers Process Systems, Palaiseau (France)

    1996-09-01

    Non-uniform voltage distribution across the electrode area results in inhomogeneous thin-film RF plasma deposition in large area reactors. In this work, a two-dimensional analytic model for the calculation of the voltage distribution across the electrode area is presented. The results of this model are in good agreement with measurements performed without plasma at 13.56 MHz and 70 MHz in a large area reactor. The principal voltage inhomogeneities are caused by logarithmic singularities in the vicinity of RF connections and not by standing waves. These singularities are only described by a two-dimensional model and cannot be intuitively predicted by analogy to a one-dimensional case. Plasma light emission measurements and thickness homogeneity studies of a-Si:H films show that the plasma reproduces these voltage inhomogeneities. Improvement of the voltage uniformity is investigated by changing the number and position of the RF connections. (author) 13 figs., 20 refs.

  14. Study on the RF power necessary to ignite plasma for the ICP test facility at HUST

    Energy Technology Data Exchange (ETDEWEB)

    Yue, Haikun [School of Electronic Information and Communications, Huazhong University of Science and Technology, Wuhan (China); State Key Laboratory of Advanced Electromagnetic Engineering and Technology, Huazhong University of Science and Technology, Wuhan (China); Li, Dong; Wang, Chenre; Li, Xiaofei; Chen, Dezhi; Liu, Kaifeng; Zhou, Chi; Pan, Ruimin [State Key Laboratory of Advanced Electromagnetic Engineering and Technology, Huazhong University of Science and Technology, Wuhan (China)

    2015-10-15

    An Radio-Frequency (RF) Inductively Coupled Plasma (ICP) ion source test facility has been successfully developed at Huazhong University of Science and Technology (HUST). As part of a study on hydrogen plasma, the influence of three main operation parameters on the RF power necessary to ignite plasma was investigated. At 6 Pa, the RF power necessary to ignite plasma influenced little by the filament heating current from 5 A to 9 A. The RF power necessary to ignite plasma increased rapidly with the operation pressure decreasing from 8 Pa to 4 Pa. The RF power necessary to ignite plasma decreased with the number of coil turns from 6 to 10. During the experiments, plasma was produced with the electron density of the order of 10{sup 16}m{sup -3} and the electron temperature of around 4 eV. (copyright 2015 WILEY-VCH Verlag GmbH and Co. KGaA, Weinheim)

  15. Current sustaining by RF travelling field in a collisional toroidal plasma

    International Nuclear Information System (INIS)

    Fukuda, Masaji; Matsuura, Kiyokata

    1978-01-01

    The relation between the current generated by RF travelling field and the absorbed power is studied in a collisional toroidal plasma, parameters being phase velocity and filling gap pressure or electron collision frequency. It is observed at a low magnetic field that the current is proportional to the plasma conductivity and an effective electromotive force, which is a new concept introduced on the basis of fluid model; the electromotive force is proportional to the absorbed RF power and inversely proportional to the plasma density and the phase velocity of the travelling field. (author)

  16. Current sustaining by RF travelling field in a collisional toroidal plasma

    International Nuclear Information System (INIS)

    Fukuda, Masaji; Matsuura, Kiyokata.

    1977-06-01

    The relation between the current generation by RF travelling field and the accompanied power absorption is studied in a collisional toroidal plasma, parameters being phase velocity and filling gas pressure or electron collision frequency. It is observed at a low magnetic field that the current is proportional to the plasma conductivity and an effective electromotive force, which is a new concept introduced on the basis of fluid model; the electromotive force is proportional to the absorbed RF power and inversely proportional to the plasma density and the phase velocity of the travelling field. (auth.)

  17. Poloidal plasma rotation in the presence of RF waves in tokamaks

    International Nuclear Information System (INIS)

    Weyssow, B.; Liu, Caigen

    2001-01-01

    It is well known that one of the consequences of strong RF heating is the deformation of the equilibrium distribution function that induces a change in plasma transport and plasma rotation. The poloidal plasma rotation during RF wave heating in tokamaks is investigated using a moment approach. A set of closed, self-consistent transport and rotation equations is derived and reduced to a single equation for the poloidal particle flux. The formulas are sufficiently general to apply to heating schemes that can be represented by a quasilinear operator. (author)

  18. Deposition of protective coatings in rf organosilicon discharges

    Czech Academy of Sciences Publication Activity Database

    Zajíčková, L.; Buršíková, V.; Kučerová, Z.; Franta, D.; Dvořák, P.; Šmíd, R.; Peřina, Vratislav; Macková, Anna

    2007-01-01

    Roč. 16, č. 1 (2007), s. 123-132 ISSN 0963-0252 R&D Projects: GA MŠk(CZ) LC06041 Institutional research plan: CEZ:AV0Z10480505 Keywords : organosilicon discharges, hardness and elastic modulus, protectove coating s Subject RIV: BL - Plasma and Gas Discharge Physics Impact factor: 2.120, year: 2007

  19. A Tightly Coupled Non-Equilibrium Magneto-Hydrodynamic Model for Inductively Coupled RF Plasmas

    Science.gov (United States)

    2016-02-29

    development a tightly coupled magneto-hydrodynamic model for Inductively Coupled Radio- Frequency (RF) Plasmas. Non Local Thermodynamic Equilibrium (NLTE...for Inductively Coupled Radio-Frequency (RF) Plasmas. Non Local Thermodynamic Equilibrium (NLTE) effects are described based on a hybrid State-to-State...Inductively Coupled Plasma (ICP) torches have wide range of possible applications which include deposition of metal coatings, synthesis of ultra-fine powders

  20. Dynamics of r.f. production of Stellarator plasmas in the ion cyclotron range of frequency

    International Nuclear Information System (INIS)

    Moiseenko, V.E.; Lysoivan, A.I.; Kasilov, S.V.; Plyusnin, V.V.

    1995-01-01

    The present study investigated numerically the process of r.f. production of plasma in the URAGAN-3M torsatron in the frequency range below the ion cyclotron frequency (ω ci ). The dynamics of r.f. plasma build-up at the stages of neutral gas burnout and plasma heating were studied using a zero-dimensional transport code, in which the plasma confinement law was determined by large helical device scaling. Two models for input r.f. power were used. In the first case, the r.f. power absorbed by the electrons was computed by a one-dimensional r.f. code solving Maxwell's boundary problem equations. The mechanisms of electron heating through direct excitation of the slow wave (SW) by antennae as well as the conversion of fast wave (FW) into SW in the vicinity of Alfven resonance (scenario of Alfven heating) were taken into account in the computations. In the second case, an 'ideal' model of r.f. power deposition onto the electrons as a linear function of plasma density was employed. A noticeable difference in plasma production dynamics computed for these two cases was found. Better agreement with experimental data obtained from the URAGAN-3M torsatron was found for the first case resulting from combination of the one-dimensional r.f. and zero-dimensional transport codes. ((orig.))

  1. Microparticles in a RF plasma under hyper gravity conditions

    NARCIS (Netherlands)

    Beckers, J.; Stoffels, W.W.; Ockenga, T.; Wolter, M.; Kersten, H.

    2009-01-01

    Summary form only given: For diagnostic purposes micrometer-sized particles can be used as floating electrostatic probes. Once injected into a complex rf plasma, these particles will become negatively charged and can be trapped in the plasma sheath due to an equilibrium of several forces working on

  2. Chemical compositions of spherical titanium powders prepared by RF induction plasma

    International Nuclear Information System (INIS)

    Gu Zhongtao; Jin Yuping; Ye Gaoying

    2012-01-01

    Spherical titanium powders were prepared by RF induction plasma technology. The particle size is essentially un- changed, while the particle size distribution is relatively narrow after spheroidization processing. X-ray diffraction (XRD) random testing of the spherical titanium powders shows no structure and phase changes. The content of O, H, N and C decreases, while the content of Ti increases slightly. It indicates that spheroidization with RF plasma can enhance powder purity. (authors)

  3. Effect on antenna structure of high power rf during plasma operation

    International Nuclear Information System (INIS)

    Haste, G.R.; Thomas, C.E.; Fadnek, A.; Carter, M.D.; Beaumont, B.; Becoulet, A.; Kuus, H.; Saoutic, B.

    1993-01-01

    High-power, long-pulse operation on the Tore Supra tokamak results in considerable stress on the plasma-facing components. The ICH antennas must deliver high-power rf(up to 4 MW per antenna) in this environment. The antenna structure is therefore subjected to the power flux resulting from the interaction between rf and the edge plasma. The structure's response during operation is described, as is the condition of the antenna after prolonged use

  4. Experimental study of the interaction between RF antennas and the edge plasma of a tokamak

    International Nuclear Information System (INIS)

    Kubic, Martin

    2013-01-01

    Antennas operating in the ion cyclotron range of frequency (ICRF) provide a useful tool for plasma heating in many tokamaks and are foreseen to play an important role in ITER. However, in addition to the desired heating in the core plasma, spurious interactions with the plasma edge and material boundary are known to occur. Many of these deleterious effects are caused by the formation of radio-frequency (RF) sheaths. The aim of this thesis is to study, mainly experimentally, scrape-off layer (SOL) modifications caused by RF sheaths effects by means of Langmuir probes that are magnetically connected to a powered ICRH antenna. Effects of the two types of Faraday screens' operation on RF-induced SOL modifications are studied for different plasma and antenna configurations - scans of strap power ratio imbalance, injected power and SOL density. In addition to experimental work, the influence of RF sheaths on retarding field analyzer (RFA) measurements of sheath potential is investigated with one-dimensional particle-in-cell code. One-dimensional particle-in-cell simulations show that the RFA is able to measure reliably the sheath potential only for ion plasma frequencies ω π similar to RF cyclotron frequency ω rf , while for the real SOL conditions (ω π ≥ ω rf ), when the RFA is magnetically connected to RF region, it is strongly underestimated. An alternative method to investigate RF sheaths effects is proposed by using broadening of the ion distribution function as an evidence of the RF electric fields in the sheath. RFA measurements in Tore Supra indicate that RF potentials do indeed propagate from the antenna 12 m along magnetic field lines. (author) [fr

  5. Double plasma system with inductively coupled source plasma and quasi-quiescent target plasma

    International Nuclear Information System (INIS)

    Massi, M.; Maciel, H.S.

    1995-01-01

    Cold plasmas have successfully been used in the plasma-assisted material processing industry. An understanding of the physicochemical mechanisms involved in the plasma-surface interaction is needed for a proper description of deposition and etching processes at material surfaces. Since these mechanisms are dependent on the plasma properties, the development of diagnostic techniques is strongly desirable for determination of the plasma parameters as well as the characterization of the electromagnetic behaviour of the discharge. In this work a dual discharge chamber, was specially designed to study the deposition of thin films via plasma polymerization process. In the Pyrex chamber an inductively coupled plasma can be excited either in the diffuse low density E-mode or in the high density H-mode. This plasma diffuses into the cylindrical stainless steel chamber which is covered with permanent magnets to produce a multidipole magnetic field configuration at the surface. By that means a double plasma is established consisting of a RF source plasma coupled to a quasi-quiescent target plasma. The preliminary results presented here refer to measurements of the profiles of plasma parameters along the central axis of the double plasma apparatus. Additionally a spectrum analysis performed by means of a Rogowski coil probe immersed into the source plasma is also presented. The discharge is made in argon with pressure varying from 10 -2 to 1 torr, and the rf from 10 to 150 W

  6. Sensitivity of RF-driven Plasma Filaments to Trace Gases

    Science.gov (United States)

    Burin, M. J.; Czarnocki, C. J.; Czarnocki, K.; Zweben, S. J.; Zwicker, A.

    2011-10-01

    Filamentary structures have been observed in many types of plasma discharges in both natural (e.g. lightning) and industrial systems (e.g. dielectric barrier discharges). Recent progress has been made in characterizing these structures, though various aspects of their essential physics remain unclear. A common example of this phenomenon can be found within a toy plasma globe (or plasma ball), wherein a primarily neon gas mixture near atmospheric pressure clearly and aesthetically displays filamentation. Recent work has provided the first characterization of these plasma globe filaments [Campanell et al., Physics of Plasmas 2010], where it was noticed that discharges of pure gases tend not to produce filaments. We have extended this initial work to investigate in greater detail the dependence of trace gases on filamentation within a primarily Neon discharge. Our preliminary results using a custom globe apparatus will be presented, along with some discussion of voltage dependencies. Newly supported by the NSF/DOE Partnership in Basic Plasma Science and Engineering.

  7. On the evaluation of currents in a tokamak plasma during combined Ohmic and RF current drive

    International Nuclear Information System (INIS)

    Eckhartt, D.

    1986-09-01

    By taking into account the rf-generated enhancement of the plasma electric conductivity (as formulated by Fisch in the limit of weak dc electric fields) a relation is derived between the ratio of rf to Ohmically driven currents and other plasma parameters to be measured before and after the rf onset under the condition of constant net plasma current. (author)

  8. Sheath and bulk expansion induced by RF bias in atmospheric pressure microwave plasma

    Science.gov (United States)

    Lee, Jimo; Nam, Woojin; Lee, Jae Koo; Yun, Gunsu

    2017-10-01

    A large axial volume expansion of microwave-driven plasma at atmospheric pressure is achieved by applying a low power radio frequency (RF) bias at an axial location well isolated from the original plasma bulk. The evolution of the plasma plume visualized by high speed ICCD imaging suggest that the free electrons drifting toward the bias electrode cause the prodigious expansion of the sheath, creating a stable plasma stream channel between the microwave and the RF electrodes. For argon plasma in ambient air, enhanced emissions of OH and N2 spectral lines are measured in the extended plume region, supporting the acceleration of electrons and subsequent generation of radical species. The coupling of RF bias with microwave provides an efficient way of enlarging the plasma volume and enhancing the production of radicals. Work supported by the National Research Foundation of Korea under BK21+ program and Grant No. 2015R1D1A1A01061556 (Ministry of Education).

  9. Optical characteristics of a RF DBD plasma jet in various A r / O 2 ...

    Indian Academy of Sciences (India)

    Using the optical emission spectrum analysis of the RF plasma jet, the excitation temperature is determined based on the Boltzmann plot method. The electron density in the plasma medium of the RF plasma jet is obtained by the Stark broadening of the hydrogen Balmer H β . It is mostly seen that, the radiation intensity of Ar ...

  10. Sheath formation and extraction of ions from a constricted R.F ion source

    Energy Technology Data Exchange (ETDEWEB)

    Abdel-Salam, F W; Helal, A G; El-Khabeary, H; El-Merai, N T [Accelerators Dept., Nuclear Research Center, Atomic Energy Authority, Cairo, (Egypt)

    1997-12-31

    The present work investigates the plasma characteristics in a constricted R. F. ion source. The extraction of ions from the plasma boundary and sheath formation were studied. The ion source physical parameters are discussed in order to understand the physical processes occurring within the discharge region up to the extraction system. Electron temperature and density were determined using Langmuir probe. The probe current-voltage characteristics were measured for different extraction voltages (ext.) = 0,500,1000, and 1250 volt at various constant R.F. powers. The effect of R.F. power on electron temperature was deduced for a beam = plasma discharge. This revealed that for a quasi-neutral (plasma) region the electron temperature increased linearly with the R.F. Power which leads to substantial electron heating and efficient electron energy transport in this region. Applying extraction voltage, the electron temperature drops as the ionization rate increases. The sheath thickness was obtained at constant extraction voltages. The curves show that if the ion current density increased, the sheath thickness decreased while it increases by increasing extraction voltage, and it is negligible in the plasma region. 13 figs.

  11. Effects of electron inertia in capacitively coupled radio frequency discharges

    International Nuclear Information System (INIS)

    Xiang Nong

    2004-01-01

    The effects of the electron inertia on the plasma and sheath dynamics in capacitively coupled rf discharges with frequency ωω pi are investigated (here, ω and ω pi are the rf frequency and bulk ion plasma frequency, respectively). It is found that the effects of the electron inertia on the plasma density and ion velocity in the quasi-neutral region depend on the ratio of the amplitudes of the discharge current I rf and ion current I B =en 0 C s (here, e is the unit charge, n 0 is the plasma density at center, and C s is the ion sound speed). If the ratio is small so that I rf /I B √(m i /m e ) (here, m i and m e are ion and electron masses, respectively), the ion and time-averaged electron densities, ion velocity, and electric fields are little affected by the electron inertia. Otherwise, the effects of the electron inertia are significant. It is also shown that the assumption that the electrons obey the Boltzmann distribution in the sheath is invalid when the electron flux flowing to the electrode is significant

  12. Characterization of In-Flight Processing of Alumina Powder Using a DC-RF Hybrid Plasma Flow System at Constant Low Operating Power

    Science.gov (United States)

    Nishiyama, H.; Onodera, M.; Igawa, J.; Nakajima, T.

    2009-12-01

    The aim of this study is to provide the optimum operating conditions for enhancing in-flight alumina particle heating as much as possible for particle spheroidization and aggregation of melted particles using a DC-RF hybrid plasma flow system even at constant low operating power based on the thermofluid considerations. It is clarified that the swirl flow and higher operating pressure enhance the particle melting and aggregation of melted particles coupled with increasing gas temperature downstream of a plasma uniformly in the radial direction at constant electrical discharge conditions.

  13. Comparison of hollow cathode discharge plasma configurations

    International Nuclear Information System (INIS)

    Farnell, Casey C; Farnell, Cody C; Williams, John D

    2011-01-01

    Hollow cathodes used in plasma contactor and electric propulsion devices provide electrons for sustaining plasma discharges and enabling plasma bridge neutralization. Life tests show erosion on hollow cathodes exposed to the plasma environment produced in the region downstream of these devices. To explain the observed erosion, plasma flow field measurements are presented for hollow cathode generated plasmas using both directly immersed probes and remotely located plasma diagnostics. Measurements on two cathode discharge configurations are presented: (1) an open, no magnetic field configuration and (2) a setup simulating the discharge chamber environment of an ion thruster. In the open cathode configuration, large amplitude plasma potential oscillations, ranging from 20 to 85 V within a 34 V discharge, were observed using a fast response emissive probe. These oscillations were observed over a dc potential profile that included a well-defined potential hill structure. A remotely located electrostatic analyzer (ESA) was used to measure the energy of ions produced within the plasma, and energies were detected that met, and in some cases exceeded, the peak oscillatory plasma potentials detected by the emissive probe. In the ion thruster discharge chamber configuration, plasma potentials from the emissive probe again agreed with ion energies recorded by the remotely located ESA; however, much lower ion energies were detected compared with the open configuration. A simplified ion-transit model that uses temporal and spatial plasma property measurements is presented and used to predict far-field plasma streaming properties. Comparisons between the model and remote measurements are presented.

  14. Beam-plasma discharge in a Kyoto beam-plasma-ion source

    International Nuclear Information System (INIS)

    Ishikawa, J.; Takagi, T.

    1983-01-01

    A beam-plasma type ion source employing an original operating principle has been developed by the present authors. The ion source consists of an ion extraction region with an electron gun, a thin long drift tube as the plasma production chamber, and a primary electron beam collector. An electron beam is effectively utilized for the dual purpose of high density plasma production as a result of beam-plasma discharge, and high current ion beam extraction with ion space-charge compensation. A high density plasma of the order of 10 11 --10 13 cm -3 was produced by virtue of the beam-plasma discharge which was caused by the interaction between a space-charge wave on the electron beam and a high frequency plasma wave. The plasma density then produced was 10 2 --10 3 times the density produced only by collisional ionization by the electron beam. In order to obtain a stable beam-plasma discharge, a secondary electron beam emitted from the electron collector should be utilized. The mechanism of the beam-plasma discharge was analyzed by use of a linear theory in the case of the small thermal energy of the electron beam, and by use of a quasilinear theory in the case of the large thermal energy. High current ion beams of more than 0.1 A were extracted even at a low extraction voltage of 1--5 kV

  15. Resonant power absorption in helicon plasma sources

    International Nuclear Information System (INIS)

    Chen Guangye; Arefiev, Alexey V.; Bengtson, Roger D.; Breizman, Boris N.; Lee, Charles A.; Raja, Laxminarayan L.

    2006-01-01

    Helicon discharges produce plasmas with a density gradient across the confining magnetic field. Such plasmas can create a radial potential well for nonaxisymmetric whistlers, allowing radially localized helicon (RLH) waves. This work presents new evidence that RLH waves play a significant role in helicon plasma sources. An experimentally measured plasma density profile in an argon helicon discharge is used to calculate the rf field structure. The calculations are performed using a two-dimensional field solver under the assumption that the density profile is axisymmetric. It is found that RLH waves with an azimuthal wave number m=1 form a standing wave structure in the axial direction and that the frequency of the RLH eigenmode is close to the driving frequency of the rf antenna. The calculated resonant power absorption, associated with the RLH eigenmode, accounts for most of the rf power deposited into the plasma in the experiment

  16. Taming Instabilities in Plasma Discharges

    International Nuclear Information System (INIS)

    Klinger, T.; Krahnstover, N. O.; Mausbach, T.; Piel, A.

    2000-01-01

    Recent experimental work on taming instabilities in plasma discharges is discussed. Instead of suppressing instabilities, it is desired to achieve control over their dynamics, done by perturbing appropriately the current flow in the external circuit of the discharge. Different discrete and continuous feedback as well as open-loop control schemes are applied. Chaotic oscillations in plasma diodes are controlled using the OGY discrete feedback scheme. This is demonstrated both in experiment and computer simulation. Weakly developed ionization wave turbulence is tamed by continuous feedback control. Open-loop control of stochastic fluctuations - stochastic resonance - is demonstrated in a thermionic plasma diode. (author)

  17. The difference between the metal ion extracted from the R.F. ion source by applying plasma chemistry reaction and by non-plasma range chemistry reaction

    International Nuclear Information System (INIS)

    Bai Gui Bin

    1987-01-01

    The paper introduced the difference between using plasma chemistry reaction draw metal ion and non-plasma range chemistry reaction in the R.F. ion source. By using of the plasma chemistry reaction draw metal ion higher percentage than non-plasma range chemistry reaction in the R.F. ion source. The authors plasma chemistry reaction to R.F. ion source and implanter successfully. The effect is very well, it has its own characteristic

  18. High-power CO laser with RF discharge for isotope separation employing condensation repression

    Science.gov (United States)

    Baranov, I. Ya.; Koptev, A. V.

    2008-10-01

    High-power CO laser can be the effective tool in such applications as isotope separation using the free-jet CRISLA method. The way of transfer from CO small-scale experimental installation to industrial high-power CO lasers is proposed through the use of a low-current radio-frequency (RF) electric discharge in a supersonic stream without an electron gun. The calculation model of scaling CO laser with RF discharge in supersonic stream was developed. The developed model allows to calculate parameters of laser installation and optimize them with the purpose of reception of high efficiency and low cost of installation as a whole. The technical decision of industrial CO laser for isotope separation employing condensation repression is considered. The estimated cost of laser is some hundred thousand dollars USA and small sizes of laser head give possibility to install it in any place.

  19. Rf probe technology for the next generation of technological plasmas

    International Nuclear Information System (INIS)

    Law, V.J.; Kenyon, A.J.; Thornhill, N.F.; Seeds, A.J.; Batty, I.

    2001-01-01

    We describe radio frequency (rf) analysis of technological plasmas at the 13.56 MHz fundamental drive frequency and integer narrow-band harmonics up to n = 9. In particular, we demonstrate the use of harmonic amplitude information as a process end-point diagnostic. Using very high frequency (vhf) techniques, we construct non-invasive ex situ remote-coupled probes: a diplexer, an equal-ratio-arm bridge, and a dual directional coupler used as a single directional device. These probes bolt into the plasma-tool 50 Ω transmission-line between the rf generator and matching network, and hence do not require modification of the plasma tool. The 50 Ω probe environment produces repeatable measurements of the chamber capacitance and narrow-band harmonic amplitude with an end-point detection sensitivity corresponding to a 2 dB change in the harmonic amplitude with the removal of 1 cm 2 of photoresist. The methodology and design of an instrument for the measurement of the plasma-tool frequency response, and the plasma harmonic amplitude and phase response are examined. The instrument allows the monitoring of the plasma phase delay, plasma-tool short- and long-term ageing, and process end-point prediction. (author)

  20. A new hybrid scheme for simulations of highly collisional RF-driven plasmas

    International Nuclear Information System (INIS)

    Eremin, Denis; Hemke, Torben; Mussenbrock, Thomas

    2016-01-01

    This work describes a new 1D hybrid approach for modeling atmospheric pressure discharges featuring complex chemistry. In this approach electrons are described fully kinetically using particle-in-cell/Monte-Carlo (PIC/MCC) scheme, whereas the heavy species are modeled within a fluid description. Validity of the popular drift-diffusion approximation is verified against a ‘full’ fluid model accounting for the ion inertia and a fully kinetic PIC/MCC code for ions as well as electrons. The fluid models require knowledge of the momentum exchange frequency and dependence of the ion mobilities on the electric field when the ions are in equilibrium with the latter. To this end an auxiliary Monte-Carlo scheme is constructed. It is demonstrated that the drift-diffusion approximation can overestimate ion transport in simulations of RF-driven discharges with heavy ion species operated in the γ mode at the atmospheric pressure or in all discharge simulations for lower pressures. This can lead to exaggerated plasma densities and incorrect profiles provided by the drift-diffusion models. Therefore, the hybrid code version featuring the full ion fluid model should be favored against the more popular drift-diffusion model, noting that the suggested numerical scheme for the former model implies only a small additional computational cost. (paper)

  1. Diagnostics of ballistic electrons in a dc/rf hybrid capacitively coupled discharge

    International Nuclear Information System (INIS)

    Xu Lin; Chen, Lee; Funk, Merritt; Ranjan, Alok; Hummel, Mike; Bravenec, Ron; Sundararajan, Radha; Economou, Demetre J.; Donnelly, Vincent M.

    2008-01-01

    The energy distribution of ballistic electrons in a dc/rf hybrid parallel-plate capacitively coupled plasma reactor was measured. Ballistic electrons originated as secondaries produced by ion and electron bombardment of the electrodes. The energy distribution of ballistic electrons peaked at the value of the negative bias applied to the dc electrode. As that bias became more negative, the ballistic electron current on the rf substrate electrode increased dramatically. The ion current on the dc electrode also increased

  2. RF-plasma vapor deposition of siloxane on paper. Part 2: Chemical evolution of paper surface

    International Nuclear Information System (INIS)

    Sahin, Halil Turgut

    2013-01-01

    Highlights: ► Investigate the detailed RF-cold plasma surface modified paper by XPS and ATR-FTIR. ► Some chemical analysis of RF-cold plasma surface modified paper after RF plasma treatment. ► Identify the connection between RF plasma treatment and the surface chemistry of paper surface. - Abstract: Survey and high-resolution (HR) XPS studies indicate that OMCTSO plasma treatment created a new silicon containing functional groups and changed the hydroxyl content on the surface of paper. Four intense survey XPS spectrum peaks were observed for the OMCTSO plasma treated paper. They were the Si 2p at 100 eV, Si 2s at 160 eV, C 1s at 285 eV, and O 1s at 525 eV for the plasma modified surface. It was realized that the macromolecular chain-breaking mechanisms and plasma-induced etching processes control the number and the availability of OH-functionalities during OMCTSO plasma exposure on paper. The reaction, initiated by these species, depends mainly on the nature of chemicals in the plasma as well as on the energy level of the plasma and the nature of the surface effects in the modification of the paper. The ATR-FTIR spectrum of paper treated with OMCTSO plasma has characteristic absorption bands attributed to the Si-O and Si-O-Si formations on the surface.

  3. DC plasma ion implantation in an inductively coupled RF plasma

    International Nuclear Information System (INIS)

    Silawatshananai, C.; Matan, N.; Pakpum, C.; Pussadee, N.; Srisantitam, P.; Davynov, S.; Vilaithong, T.

    2004-01-01

    Various modes of plasma ion implantation have been investigated in a small inductively coupled 13.6 MHz RF plasma source. Plasma ion implantation with HVDC(up to -10 kV bias) has been investigated in order to incorporate with the conventional implantation of diamond like carbon. In this preliminary work, nitrogen ions are implanted into the stainless steel sample with a dose of 5.5 x 10 -2 cm for a short implanting time of 7 minutes without target cooling. Surface properties such as microhardness, wear rate and the friction coefficient have been improved. X-ray and SEM analyses show distinct structural changes on the surface. A combination of sheath assisted implantation and thermal diffusion may be responsible for improvement in surface properties. (orig.)

  4. Self-consistent evolution of plasma discharge and electromagnetic fields in a microwave pulse compressor

    International Nuclear Information System (INIS)

    Shlapakovski, A. S.; Beilin, L.; Krasik, Ya. E.; Hadas, Y.; Schamiloglu, E.

    2015-01-01

    Nanosecond-scale evolution of plasma and RF electromagnetic fields during the release of energy from a microwave pulse compressor with a plasma interference switch was investigated numerically using the code MAGIC. The plasma was simulated in the scope of the gas conductivity model in MAGIC. The compressor embodied an S-band cavity and H-plane waveguide tee with a shorted side arm filled with pressurized gas. In a simplified approach, the gas discharge was initiated by setting an external ionization rate in a layer crossing the side arm waveguide in the location of the electric field antinode. It was found that with increasing ionization rate, the microwave energy absorbed by the plasma in the first few nanoseconds increases, but the absorption for the whole duration of energy release, on the contrary, decreases. In a hybrid approach modeling laser ignition of the discharge, seed electrons were set around the electric field antinode. In this case, the plasma extends along the field forming a filament and the plasma density increases up to the level at which the electric field within the plasma decreases due to the skin effect. Then, the avalanche rate decreases but the density still rises until the microwave energy release begins and the electric field becomes insufficient to support the avalanche process. The extraction of the microwave pulse limits its own power by terminating the rise of the plasma density and filament length. For efficient extraction, a sufficiently long filament of dense plasma must have sufficient time to be formed

  5. Self-consistent evolution of plasma discharge and electromagnetic fields in a microwave pulse compressor

    Science.gov (United States)

    Shlapakovski, A. S.; Beilin, L.; Hadas, Y.; Schamiloglu, E.; Krasik, Ya. E.

    2015-07-01

    Nanosecond-scale evolution of plasma and RF electromagnetic fields during the release of energy from a microwave pulse compressor with a plasma interference switch was investigated numerically using the code MAGIC. The plasma was simulated in the scope of the gas conductivity model in MAGIC. The compressor embodied an S-band cavity and H-plane waveguide tee with a shorted side arm filled with pressurized gas. In a simplified approach, the gas discharge was initiated by setting an external ionization rate in a layer crossing the side arm waveguide in the location of the electric field antinode. It was found that with increasing ionization rate, the microwave energy absorbed by the plasma in the first few nanoseconds increases, but the absorption for the whole duration of energy release, on the contrary, decreases. In a hybrid approach modeling laser ignition of the discharge, seed electrons were set around the electric field antinode. In this case, the plasma extends along the field forming a filament and the plasma density increases up to the level at which the electric field within the plasma decreases due to the skin effect. Then, the avalanche rate decreases but the density still rises until the microwave energy release begins and the electric field becomes insufficient to support the avalanche process. The extraction of the microwave pulse limits its own power by terminating the rise of the plasma density and filament length. For efficient extraction, a sufficiently long filament of dense plasma must have sufficient time to be formed.

  6. Basic principles and applications of atmospheric-pressure discharge plasmas

    International Nuclear Information System (INIS)

    Becker, K.H.

    2002-01-01

    The principles that govern the generation and maintenance of atmospheric - pressure discharge plasmas are summarized. The properties and operating parameters of various types such as dielectric barrier discharge plasmas (DBDs), corona discharge plasmas (CDs), microhollow cathode discharge plasmas (MHCDs) , and dielectric capillary electrode discharge plasmas (CDEDs) are introduced. All of them are self sustained, non equilibrium gas discharges that can be operated at atmospheric pressure. CDs and DBDDs represent very similar types of discharges, while DBDs are characterized by insulating layers on one or both electrodes, CDs depend on inhomogeneous electric fields at least in some parts of the electrode configuration to restrict the primary ionization processes to a small fraction of the inter - electrode region. Their application to novel light sources in the ultraviolet (UV) and vacuum ultraviolet (VUV) spectral region is described. (nevyjel)

  7. Atmospheric-pressure plasma jet

    Science.gov (United States)

    Selwyn, Gary S.

    1999-01-01

    Atmospheric-pressure plasma jet. A .gamma.-mode, resonant-cavity plasma discharge that can be operated at atmospheric pressure and near room temperature using 13.56 MHz rf power is described. Unlike plasma torches, the discharge produces a gas-phase effluent no hotter than 250.degree. C. at an applied power of about 300 W, and shows distinct non-thermal characteristics. In the simplest design, two concentric cylindrical electrodes are employed to generate a plasma in the annular region therebetween. A "jet" of long-lived metastable and reactive species that are capable of rapidly cleaning or etching metals and other materials is generated which extends up to 8 in. beyond the open end of the electrodes. Films and coatings may also be removed by these species. Arcing is prevented in the apparatus by using gas mixtures containing He, which limits ionization, by using high flow velocities, and by properly shaping the rf-powered electrode. Because of the atmospheric pressure operation, no ions survive for a sufficiently long distance beyond the active plasma discharge to bombard a workpiece, unlike low-pressure plasma sources and conventional plasma processing methods.

  8. Cold plasmas

    International Nuclear Information System (INIS)

    Franz, G.

    1990-01-01

    This textbook discusses the following topics: Phenomenological description of a direct current glow discharge; the plasma (temperature distribution and measurement, potential variation, electron energy distribution function, charge neutralization, wall potentials, plasma oscillations); Production of charge carriers (ions, electrons, ionization in the cathode zone, negative glowing zone, Faraday dark space, positive column, anode zone, hollow cathode discharges); RF-discharges (charge carrier production, RF-Shields, scattering mechanisms); Sputtering (ion-surface interaction, kinetics, sputtering yield and energy distribution, systems and conditions, film formation and stresses, contamination, bias techniques, multicomponent film deposition, cohesion, magnetrons, triode systems, plasma enhanced chemical vapor deposition); Dry etching (sputter etching, reactive etching, topography, process control, quantitative investigations); Etching mechanisms (etching of Si and SiO 2 with CF 4 , of III/V-compound-semiconductors, combination of isotrope and anisotrope etching methods, surface cleaning); ion beam systems (applications, etching); Dyclotron-resonance-systems (electron cyclotron resonance systems, whistler-sources and 'resonant inductive plasma etching'); Appendix (electron energy distribution functions, Bohm's transition zone, plasma oscillations, scattering cross sections and mean free path, metastable states, Child-Langmuir-Schottky equation, loss mechanisms, charge carrier distribution in the positive column, breakdown at high frequencies, motion in a magnetic field, skin depth of an electric field for a HF-discharge, whistler waves, dispersion relations for plane wave propagation). (orig.) With 138 figs

  9. Coaxial discharge plasma parameters and radiation emission

    International Nuclear Information System (INIS)

    Solimen, H.M.

    1993-01-01

    Results are reported for experiments carried out on a Mather type coaxial discharge plasma device. Experimental measurements of the electron temperature and density for the plasma propagated from the coaxial discharge are determined by using a biased double electric probe. The experimental results illustrated that , there are two groups of the plasma in the ejected plasma bulk, at 9 cm from the muzzle axis, the plasma reached the probe at 20 μsec from the start of discharge. The first group has electron temperature and density 27 eV and 3 x 10 14 cm -3 respectively,while The second group has 25 eV and 3 x 10 14 cm -3 respectively. The decay rate of the electron temperature and density of each group is presented. The plasma radiation spectrum is detected by a dielectric filter at 3500 A degree or 6100 A degree . The experimental measurements showed that, without or with dielectric filters, the visible radiation consists from two pulses with different magnitudes within the same half cycle of discharge. The time resolution of the soft x-ray is achieved by means of scintillator detector. The detected x-ray pulse during the first half cycle of discharge had a double peaks with different structures. All the experimental results present in this paper showed that the plasma bulk propagated in the expansion chamber, consists of two-groups. 6 fig

  10. Characterization of gaseous species in scanning atmospheric rf plasma with transmission infrared spectroscopy

    International Nuclear Information System (INIS)

    Kim, Seong H.; Kim, Jeong Hoon; Kang, Bang-Kwon

    2008-01-01

    A scanning atmospheric radio-frequency (rf) plasma was analyzed with transmission infrared (IR) spectroscopy. The IR analyses were made for the plasmas used for hydrophobic coating deposition and superhydrophobic coating deposition processes. Since the rf plasma was generated in a small open space with a high gas flow rate in ambient air, the density of gas-phase molecules was very high and the plasma-generated reactive species seemed to undergo various reactions in the gas phase. So, the transmission IR spectra of the scanning atmospheric rf plasma were dominated by gas-phase reaction products, rather than plasma-generated intermediate species. In the CH 4 /He plasma used for hydrophobic coating deposition, C 2 H 6 , C 2 H 2 , and a small amount of C 2 H 4 as well as CO were detected in transmission IR. The intensities of these peaks increased as the rf power increased. The CO formation is due to the activation of oxygen and water in the air. In the CF 4 /H 2 /He plasma used for deposition of superhydrophobic coatings, C 2 F 6 , CF 3 H, COF 2 , and HF were mainly detected. When the H 2 /CF 4 ratio was ∼0.5, the consumption of CF 4 was the highest. As the H 2 /CF 4 ratio increased higher, the C 2 F 6 production was suppressed while the CF 3 H peak grew and the formation of CH 4 were detected. In both CH 4 /He and CF 4 /H 2 /He plasma systems, the undissociated feed gas molecules seem to be highly excited vibrationally and rotationally. The information on plasma-generated reactive species and their reactions was deduced from the distribution of these gas-phase reaction products

  11. Investigation of surface boundary conditions for continuum modeling of RF plasmas

    Science.gov (United States)

    Wilson, A.; Shotorban, B.

    2018-05-01

    This work was motivated by a lacking general consensus in the exact form of the boundary conditions (BCs) required on the solid surfaces for the continuum modeling of Radiofrequency (RF) plasmas. Various kinds of number and energy density BCs on solid surfaces were surveyed, and how they interacted with the electric potential BC to affect the plasma was examined in two fundamental RF plasma reactor configurations. A second-order local mean energy approximation with equations governing the electron and ion number densities and the electron energy density was used to model the plasmas. Zero densities and various combinations of drift, diffusion, and thermal fluxes were considered to set up BCs. It was shown that the choice of BC can have a significant impact on the sheath and bulk plasma. The thermal and diffusion fluxes to the surface were found to be important. A pure drift BC for dielectric walls failed to produce a sheath.

  12. Generation of ion-acoustic waves in an inductively coupled, low-pressure discharge lamp

    International Nuclear Information System (INIS)

    Camparo, J. C.; Klimcak, C. M.

    2006-01-01

    For a number of years it has been known that the alkali rf-discharge lamps used in atomic clocks can exhibit large amplitude intensity oscillations. These oscillations arise from ion-acoustic plasma waves and have typically been associated with erratic clock behavior. Though large amplitude ion-acoustic plasma waves are clearly deleterious for atomic clock operation, it does not follow that small amplitude oscillations have no utility. Here, we demonstrate two easily implemented methods for generating small amplitude ion-acoustic plasma waves in alkali rf-discharge lamps. Furthermore, we demonstrate that the frequency of these waves is proportional to the square root of the rf power driving the lamp and therefore that their examination can provide an easily accessible parameter for monitoring and controlling the lamp's plasma conditions. This has important consequences for precise timekeeping, since the atomic ground-state hyperfine transition, which is the heart of the atomic clock signal, can be significantly perturbed by changes in the lamp's output via the ac-Stark shift

  13. Dissociation of molecular iodine in RF discharge for oxygen-iodine laser

    Czech Academy of Sciences Publication Activity Database

    Jirásek, Vít; Schmiedberger, Josef; Čenský, Miroslav; Kodymová, Jarmila

    2012-01-01

    Roč. 66, č. 4 (2012), 1-6 ISSN 1434-6060 R&D Projects: GA ČR GA202/09/0310 Grant - others:European Office for Aerospace R&D(XE) FA8655-09-1-3092 Institutional research plan: CEZ:AV0Z10100523 Keywords : molecular iodine * RF discharge * dissociation * oxygen-iodine laser * COIL Subject RIV: BH - Optics, Masers, Lasers Impact factor: 1.513, year: 2012

  14. Development of a discharge-heated plasma tube

    International Nuclear Information System (INIS)

    Cha, Byung Heon; Jin, J. T.; Nam, S. M.; Lee, S. M.; Choi, H. L.; Ko, D. K.; Kim, S. H.; Lee, Y. B.; Choi, Y. S.; Lee, J. M.; Lee, C. K.; Lee, H. G.; Lee, H. C.; Jung, S. M.; Kim, Y. J.; Choi, G. S.; Son, N. G.

    1999-12-01

    A discharge-heated type plasma tube was designed and constructed. The structure of the laser plasma tube was designed to be easy in maintenance. The inside plasma tube was made of a high purity alumina and the thermal insulator tube was made of a porous alumina. The electrode made of tungsten was chosen for the endurance of high discharge voltage. AR coated windows were used as laser windows. A proto-type laser plasma tube was tested with a pulse modulator. An average laser output power was 32 W at the discharge voltage of 28 kV, the electric input power of 4.6 kW, and the pulse repetition rates of 10 kHz. (author)

  15. Hybrid Simulation of Duty Cycle Influences on Pulse Modulated RF SiH4/Ar Discharge

    Science.gov (United States)

    Wang, Xifeng; Song, Yuanhong; Zhao, Shuxia; Dai, Zhongling; Wang, Younian

    2016-04-01

    A one-dimensional fluid/Monte-Carlo (MC) hybrid model is developed to describe capacitively coupled SiH4/Ar discharge, in which the lower electrode is applied by a RF source and pulse modulated by a square-wave, to investigate the modulation effects of the pulse duty cycle on the discharge mechanism. An electron Monte Carlo simulation is used to calculate the electron energy distribution as a function of position and time phase. Rate coefficients in chemical reactions can then be obtained and transferred to the fluid model for the calculation of electron temperature and densities of different species, such as electrons, ions, and radicals. The simulation results show that, the electron energy distribution f(ɛ) is modulated evidently within a pulse cycle, with its tail extending to higher energies during the power-on period, while shrinking back promptly in the afterglow period. Thus, the rate coefficients could be controlled during the discharge, resulting in modulation of the species composition on the substrate compared with continuous excitation. Meanwhile, more negative ions, like SiH-3 and SiH-2, may escape to the electrodes owing to the collapse of ambipolar electric fields, which is beneficial to films deposition. Pulse modulation is thus expected to provide additional methods to customize the plasma densities and components. supported by National Natural Science Foundation of China (No. 11275038)

  16. Application of Radio-Frequency Plasma Glow Discharge to Removal of Uranium Dioxide from Metal Surfaces

    International Nuclear Information System (INIS)

    El-Genk, Mohamed S.; Saber, Hamed H.

    2000-01-01

    Recent experiments have shown that radio-frequency (rf) plasma glow discharge using NF 3 gas is an effective technique for the removal of uranium oxide from metal surfaces. The results of these experiments are analyzed to explain the measured dependence of the UO 2 removal or etch rate on the NF 3 gas pressure and the absorbed power in the plasma. The NF 3 gas pressure in the experiments was varied from 10.8 to 40 Pa, and the deposited power in the plasma was varied from 25 to 210 W. The UO 2 etch rate was strongly dependent on the absorbed power and, to a lesser extent, on the NF 3 pressure and decreased exponentially with immersion time. At 210 W and 17 Pa, all detectable UO 2 in the samples (∼10.6 mg each) was removed at the endpoint, whereas the initial etch rate was ∼3.11 μm/min. When the absorbed power was ≤50 W, however, the etch rate was initially ∼0.5 μg/min and almost zero at the endpoint, with UO 2 only partially etched. This self-limiting etching of UO 2 at low power is attributed to the formation of nonvolatile intermediates UF 2 , UF 3 , UF 4 , UF 5 , UO 2 F, and UO 2 F 2 on the surface. Analysis indicated that the accumulation of UF 6 and, to a lesser extent, O 2 near the surface partially contributed to the exponential decrease in the UO 2 etch rate with immersion time. Unlike fluorination with F 2 gas, etching of UO 2 using rf glow discharge is possible below 663 K. The average etch rates of the amorphous UO 2 in the NF 3 experiments are comparable to the peak values reported in other studies for crystalline UO 2 using CF 4 /O 2 glow discharge performed at ∼150 to 250 K higher sample temperatures

  17. Comparative studies of chemically synthesized and RF plasma ...

    Indian Academy of Sciences (India)

    journal of. April 2015 physics pp. 653–665. Comparative studies of ... MS received 16 April 2013; revised 5 February 2014; accepted 28 May 2014 ... RF plasma polymerization; poly(o-toluidine); Fourier transform infrared; UV–visible ... tial applications, e.g., as electrodes and membranes for electrochemical energy ...

  18. Design aspects of 13.56MHz, 1kW, CW-RF oscillator for plasma production

    International Nuclear Information System (INIS)

    Kumar, Sunil; Kadia, Bhavesh; Singh, Raj; Varia, Atul; Srinivas, Y S S; Kulkarni, S V

    2010-01-01

    RF produced plasma has many applications in plasma processing and also it is useful in studying the fundamental characteristics of the plasma. A 1KW RF Hartley oscillator is designed and tested at 13.56 MHz. This has been built at RF section of Institute for Plasma Research by using EIMAC (3CX1200A7) triode tube. The RF source is operated in the grounded cathode mode. Triode 3CX1200A7 is operated in class AB and the feedback is Cathode grounded. The tube has sufficient margin in terms of plate dissipation and Grid dissipation that makes it suitable to withstand momentarily load mismatch. To optimize the RF source along with HVDC power supply many mechanical and electrical aspects have been thought of to enhance the overall quality of the system. This source mainly has three sections (The RF section, HVDC Power supply and soft start Filament Power supply). The system is compact and is housed in a 80 cm x 60 cm x 1800 cm aluminum panel. This paper describes the specifications, design criteria, circuit used, operating parameters of 1KW Oscillator along with HVDC power supply with necessary interlocks, tests conducted and results obtained of this 1 KW grounded grid Hartley Oscillator on 50 ohm dummy load. This system has been tested for 8 hours of continuous operation without any appreciable deterioration of the RF output power.

  19. The diagnostic neutral beam injector with arc-discharge plasma source on the TCV Tokamak

    Energy Technology Data Exchange (ETDEWEB)

    Karpushov, Alexander N. [Ecole Polytechnique Federale de Lausanne (EPFL), Centre de Recherches en Physique des Plasmas, Association Euratom-Confederation Suisse, CH-1015 Lausanne (Switzerland)], E-mail: alexander.karpushov@epfl.ch; Andrebe, Yanis; Duval, Basil P.; Bortolon, Alessandro [Ecole Polytechnique Federale de Lausanne (EPFL), Centre de Recherches en Physique des Plasmas, Association Euratom-Confederation Suisse, CH-1015 Lausanne (Switzerland)

    2009-06-15

    The diagnostic neutral beam injector (DNBI) together with a charge exchange recombination spectroscopy (CXRS) system has been used on the TCV Tokamak as a diagnostic tool for local measurements of plasma ion temperature, velocity and carbon impurity density based on analysis of the beam induced impurity radiation emission since 2000. To improve the performance of the CXRS diagnostic, several upgrades of both the optical system and the neutral beam were performed. An increase of the plasma source size together with beam optimization in 2003 resulted in a twofold increase the beam current. The RF plasma generator was replaced by an arc-discharge plasma source together with a new ion optical system (IOS) in 2006 and subsequent beam optimization is presented herein. This was designed to increase the line brightness of the beam in the CXRS observation region without increasing of the injected power (to avoid plasma perturbation by the beam). The beam characteristics are measured by a multi-chord scanning of Doppler-shifted H{sub {alpha}} emission, thermal measurements on a movable calorimeter and visible optical measurements inside the Tokamak vessel.

  20. Transition of RF internal antenna plasma by gas control

    Energy Technology Data Exchange (ETDEWEB)

    Hamajima, Takafumi; Yamauchi, Toshihiko; Kobayashi, Seiji; Hiruta, Toshihito; Kanno, Yoshinori [Advanced Institute of Industrial Technology, 1-10-40 HigashiOhi, Shinagawa-ku, Tokyo, 140-0011 (Japan); Japan Atomic Energy Agency, 2-4 Tokai-mura, Naka-gun, Ibaraki-ken, 319-1195 (Japan)

    2012-07-11

    The transition between the capacitively coupled plasma (CCP) and the inductively coupled plasma (ICP) was investigated with the internal radio frequency (RF) multi-turn antenna. The transition between them showed the hysteresis curve. The radiation power and the period of the self-pulse mode became small in proportion to the gas pressure. It was found that the ICP transition occurred by decreasing the gas pressure from 400 Pa.

  1. Method of controlling plasma discharge in a thermonuclear device

    International Nuclear Information System (INIS)

    Kawasaki, Kozo; Ishida, Takayuki; Takemaru, Koichi; Kawasaki, Takahide.

    1982-01-01

    Purpose: To prolong the plasma discharging period by previously increasing the temperature at the thick portion of a vacuum container prior to the plasma discharge to thereby decrease the temperature difference caused by the plasma discharge between the thick portion and the bellows. Method: Temperature values at the outer surface of the thick portion and the bellows of a vacuum container detected by temperature sensors are applied to the input processing section of a temperature control device, and baking control is carried out by way of the output processing section so that each of the portions of the vacuum container may be maintained at the temperature set by the temperature setting section based on the calculation performed in the control processing section. By previously increasing the temperature β at the thick portion higher by about 100 0 C than the temperature α for the bellows in the baking treatment prior to the plasma discharge, the plasma discharge period during which the temperature levels at both of the portions are reversed after the plasma discharge and the temperature difference arrives at a predetermined level i.g., of 100 0 C can significantly be prolonged as compared with the case where the plasma discharge is started at the same temperature for both of the portions. (Yoshino, Y.)

  2. Plasma characteristics in non-sinusoidally excited CCP discharges

    Science.gov (United States)

    Lafleur, Trevor; Booth, Jean-Paul

    2012-10-01

    Using particle-in-cell (PIC) simulations we perform a characterization of the plasma response to positive pulse-type voltage excitations (with a repetition frequency of 13.56 MHz) in a geometrically symmetric CCP reactor (with a gap length of 2 cm) operated with argon (for pressures between 20-500 mTorr). Use of these non-sinusoidal waveforms generates an electrical asymmetry effect in the system, which necessitates the formation of a DC bias. This DC bias, together with the shape of the voltage waveforms used, produces a number of new phenomena that are not present in typical sinusoidal discharges: (1) the plasma density and ion flux can be increased as the pulse width is reduced, (2) a significant asymmetry in the ion fluxes to the powered and grounded electrodes develops as the pressure increases, (3) the average ion energy striking the grounded electrode remains low and approximately constant as the pulse width decreases, and (4) the sheath at the grounded electrode never fully collapses; electrons are no longer lost in sharp pulses, but escape essentially throughout the rf cycle. Effects (1) and (3) above offer the possibility for a new form of control in these types of discharges, where the ion flux can be increased while the ion energy on the grounded electrode can be kept small and essentially constant. This effect has recently been exploited to control the crystallinity of silicon thin films [1], where the low ion bombarding energy was found to improve the quality of films grown. [4pt] [1] Johnson E V, Pouliquen S, Delattre P A, and Booth J P, J. Non-Cryst. Solids 2012, in press.

  3. Collector floating potentials in a discharge plasma

    International Nuclear Information System (INIS)

    Cercek, M.; Gyergyek, T.

    1999-01-01

    We present the results of a study on electrode floating potential formation in a hot-cathode discharge plasma. The electron component of the plasma is composed from two populations. The high temperature component develops from primary electrons and the cool component from secondary electrons born by ionisation of cold neutral gas. A static, kinetic plasma-sheath model is use to calculate the pre-sheath potential and the floating potential of the electrode. For hot primary electrons a truncated Maxwellian distribution is assumed. The plasma system is also modelled numerically with a dynamic, electrostatic particle simulation. The plasma source injects temporally equal fluxes of ions and electrons with half-Maxwellian velocities. Again, the hot electron distribution is truncated in the high velocity tail. The plasma parameters, such as ion temperature and mass, electron temperatures, discharge voltages, etc. correspond to experimental values. The experimental measurements of the electrode floating potential are performed in weakly magnetised plasma produced with hot cathode discharge in argon gas. Theoretical, simulation and experimental results are compared and they agree very well.(author)

  4. Experiments on Ion-Ion Plasmas From Discharges

    Science.gov (United States)

    Leonhardt, Darrin; Walton, Scott; Blackwell, David; Murphy, Donald; Fernsler, Richard; Meger, Robert

    2001-10-01

    Use of both positive and negative ions in plasma processing of materials has been shown to be advantageous[1] in terms of better feature evolution and control. In this presentation, experimental results are given to complement recent theoretical work[2] at NRL on the formation and decay of pulsed ion-ion plasmas in electron beam generated discharges. Temporally resolved Langmuir probe and mass spectrometry are used to investigate electron beam generated discharges during the beam on (active) and off (afterglow) phases in a variety of gas mixtures. Because electron-beam generated discharges inherently[3] have low electron temperatures (<0.5eV in molecular gases), negative ion characteristics are seen in the active as well as afterglow phases since electron detachment increases with low electron temperatures. Analysis of temporally resolved plasma characteristics deduced from these measurements will be presented for pure O_2, N2 and Ar and their mixtures with SF_6. Oxygen discharges show no noticeable negative ion contribution during the active or afterglow phase, presumably due to the higher energy electron attachment threshold, which is well above any electron temperature. In contrast, SF6 discharges demonstrate ion-ion plasma characteristics in the active glow and are completely ion-ion in the afterglow. Comparison between these discharges with published cross sections and production mechanisms will also be presented. [1] T.H. Ahn, K. Nakamura & H. Sugai, Plasma Sources Sci. Technol., 5, 139 (1996); T. Shibyama, H. Shindo & Y. Horiike, Plasma Sources Sci. Technol., 5, 254 (1996). [2] See presentation by R. F. Fernsler, at this conference. [3] D. Leonhardt, et al., 53rd Annual GEC, Houston, TX.

  5. Discharge cleaning of carbon deposits

    International Nuclear Information System (INIS)

    Mozetic, M.; Vesel, A.; Drenik, A.

    2006-01-01

    Experimental results of discharge cleaning of carbon deposits are presented. Deposits were prepared by creating plasma in pure methane. The methane was cracked in RF discharge at the output power of 250 W. The resultant radicals were bonded to the wall of discharge vessel forming a thin film of hydrogenated black carbon with the thickness of about 200nm. The film was then cleaned in situ by oxygen plasma with the density of about 1x10 16 m -3 , electron temperature of 5 eV, neutral gas kinetic temperature of about 100 0 C and neutral atom density of 6x10 21 m -3 . The treatment time was 30 minutes. The efficiency of plasma cleaning was monitored by optical emission spectroscopy. As long as the wall was contaminated with carbon deposit, substantial emission of the CO molecules was detected. As the cleaning was in progress, the CO emission was decreasing and vanished after 30 minutes when the discharge vessel became free of any carbon. The results are explained by interaction of plasma radicals with carbon deposits. (author)

  6. Plasma-liquid system with rotational gliding discharge with liquid electrode

    International Nuclear Information System (INIS)

    Nedybaliuk, O.A.; Solomenko, O.V; Martysh, E.V.; Fedirchuk, I.I.

    2014-01-01

    Plasma-liquid system based on rotational gliding discharge with one liquid electrode was developed. Emission spectra of plasma of rotational gliding discharge with one liquid electrode were investigated. Discovered effective mechanism of controlling non-isothermal level of plasma in dynamic plasma-liquid systems. Major mechanism of expulsion of metal anode material from plasma-liquid systems with rotational discharges was shown.

  7. About the EDF formation in a capacitively coupled argon plasma

    International Nuclear Information System (INIS)

    Tatanova, M; Thieme, G; Basner, R; Hannemann, M; Golubovskii, Yu B; Kersten, H

    2006-01-01

    The formation of the electron distribution function (EDF) in the bulk plasma of a capacitively coupled radio-frequency (rf) discharge in argon generated in the plasma-chemical reactor PULVA-INP is investigated experimentally and theoretically. Measurements of the EDF and internal plasma parameters were performed by means of a Langmuir probe at pressures of 0.5-100 Pa and discharge powers of 5-100 W. The observed EDFs have revealed a two-temperature behaviour at low pressures and evolved into a Maxwellian distribution at high gas pressures and large discharge powers. Theoretical determination of the EDF is based on the numerical solution of the Boltzmann kinetic equation in the local and non-local approaches under experimental conditions. The model includes elastic and inelastic electron-atom collisions and electron-electron interactions. Low electron temperatures and relatively high ionization degrees are the features of the PULVA-INP rf discharge. This leads to significant influence of the electron-electron collisions on the EDF formation. The modelled and measured distributions show good agreement in a wide range of discharge parameters, except for a range of low gas pressures, where the stochastic electron heating is intense. Additionally, mechanisms of the EDF formation in the dc and rf discharge were compared under similar discharge conditions

  8. About the EDF formation in a capacitively coupled argon plasma

    Energy Technology Data Exchange (ETDEWEB)

    Tatanova, M [Institute of Physics, Saint-Petersburg State University, ul. Ulianovskaja 1, 198504 Saint-Petersburg (Russian Federation); Thieme, G [Institut fur Niedertemperatur-Plasmaphysik, Friedrich-Ludwig-Jahn-Str 19, D-17489 Greifswald (Germany); Basner, R [Institut fur Niedertemperatur-Plasmaphysik, Friedrich-Ludwig-Jahn-Str 19, D-17489 Greifswald (Germany); Hannemann, M [Institut fur Niedertemperatur-Plasmaphysik, Friedrich-Ludwig-Jahn-Str 19, D-17489 Greifswald (Germany); Golubovskii, Yu B [Institute of Physics, Saint-Petersburg State University, ul. Ulianovskaja 1, 198504 Saint-Petersburg (Russian Federation); Kersten, H [Institut fur Niedertemperatur-Plasmaphysik, Friedrich-Ludwig-Jahn-Str 19, D-17489 Greifswald (Germany)

    2006-08-01

    The formation of the electron distribution function (EDF) in the bulk plasma of a capacitively coupled radio-frequency (rf) discharge in argon generated in the plasma-chemical reactor PULVA-INP is investigated experimentally and theoretically. Measurements of the EDF and internal plasma parameters were performed by means of a Langmuir probe at pressures of 0.5-100 Pa and discharge powers of 5-100 W. The observed EDFs have revealed a two-temperature behaviour at low pressures and evolved into a Maxwellian distribution at high gas pressures and large discharge powers. Theoretical determination of the EDF is based on the numerical solution of the Boltzmann kinetic equation in the local and non-local approaches under experimental conditions. The model includes elastic and inelastic electron-atom collisions and electron-electron interactions. Low electron temperatures and relatively high ionization degrees are the features of the PULVA-INP rf discharge. This leads to significant influence of the electron-electron collisions on the EDF formation. The modelled and measured distributions show good agreement in a wide range of discharge parameters, except for a range of low gas pressures, where the stochastic electron heating is intense. Additionally, mechanisms of the EDF formation in the dc and rf discharge were compared under similar discharge conditions.

  9. Plasma deposition by discharge in powder

    International Nuclear Information System (INIS)

    El-Gamal, H.A.; El-Tayeb, H.A.; Abd El-Moniem, M.; Masoud, M.M.

    2000-01-01

    Different types of material powders have been fed to the breach of a coaxial discharge. The coaxial discharge is powered from a 46.26 mu F, 24 KV capacitor bank. When the discharge takes place at the breach, the powder is heated and ionized to form a sheath of its material. The plasma sheath is ejected from the discharge zone with high velocity. The plasma sheath material is deposited on a glass substrate. It has been found from scanning electron microscope (SEM) analysis that the deposited material is almost homogenous for ceramic and graphite powders. The grain size is estimated to be the order of few microns. To measure the deposited material thickness the microdensitometer and a suitable arrangement of a laser interferometer and an optical microscope are used. It has also been found that deposited material thickness depends on the discharge number of shots and the capacitor bank energy

  10. Large area atmospheric-pressure plasma jet

    Science.gov (United States)

    Selwyn, Gary S.; Henins, Ivars; Babayan, Steve E.; Hicks, Robert F.

    2001-01-01

    Large area atmospheric-pressure plasma jet. A plasma discharge that can be operated at atmospheric pressure and near room temperature using 13.56 MHz rf power is described. Unlike plasma torches, the discharge produces a gas-phase effluent no hotter than 250.degree. C. at an applied power of about 300 W, and shows distinct non-thermal characteristics. In the simplest design, two planar, parallel electrodes are employed to generate a plasma in the volume therebetween. A "jet" of long-lived metastable and reactive species that are capable of rapidly cleaning or etching metals and other materials is generated which extends up to 8 in. beyond the open end of the electrodes. Films and coatings may also be removed by these species. Arcing is prevented in the apparatus by using gas mixtures containing He, which limits ionization, by using high flow velocities, and by properly spacing the rf-powered electrode. Because of the atmospheric pressure operation, there is a negligible density of ions surviving for a sufficiently long distance beyond the active plasma discharge to bombard a workpiece, unlike the situation for low-pressure plasma sources and conventional plasma processing methods.

  11. Advancement of In-Flight Alumina Powder Spheroidization Process with Water Droplet Injection Using a Small Power DC-RF Hybrid Plasma Flow System

    Science.gov (United States)

    Jang, Juyong; Takana, Hidemasa; Park, Sangkyu; Nishiyama, Hideya

    2012-09-01

    The correlation between plasma thermofluid characteristics and alumina powder spheroidization processes with water droplet injection using a small power DC-RF hybrid plasma flow system was experimentally clarified. Micro-sized water droplets with a low water flow rate were injected into the tail of thermal plasma flow so as not to disturb the plasma flow directly. Injected water droplets were vaporized in the thermal plasma flow and were transported upstream in the plasma flow to the torch by the backflow. After dissociation of water, the production of hydrogen was detected by the optical emission spectroscopy in the downstream RF plasma flow. The emission area of the DC plasma jet expanded and elongated in the vicinity of the RF coils. Additionally, the emission area of RF plasma flow enlarged and was visible as red emission in the downstream RF plasma flow in the vicinity below the RF coils due to hydrogen production. Therefore, the plasma flow mixed with produced hydrogen increased the plasma enthalpy and the highest spheroidization rate of 97% was obtained at a water flow rate of 15 Sm l/min and an atomizing gas flow rate of 8 S l/min using a small power DC-RF hybrid plasma flow system.

  12. Deactivation of Escherichia coli in a post-discharge chamber coupled to an atmospheric pressure multi-electrode DBD plasma source

    International Nuclear Information System (INIS)

    Pérez-Ruiz, V H; López-Callejas, R; De la Piedad Beneitez, A; Peña-Eguiluz, R; Mercado-Cabrera, A; Muñoz-Castro, A E; Barocio, S R; Valencia-Alvarado, R; Rodríguez-Méndez, B G

    2012-01-01

    Experimental results from applying a room pressure RF multi-electrode DBD plasma source to the inhibition of the population growth of Gram negative Escherichia coli (E. coli) within a post-discharge reactor are reported. The sample to be treated is deposited in the post-discharge chamber at about 50 mm from the plasma source outlet. Thus, the active species generated by the source are conveyed toward the chamber by the working gas flow. The plasma characterization included the measurement of the axial temperature at different distances from the reactor outlet by means of a K-type thermocouple. The resulting 294 K to 322 K temperature interval corresponded to distances between 10 mm to 1 mm respectively. As the material under treatment is placed further away, any thermal damage of the sample by the plasma is prevented. The measurement and optimization of the ozone O 3 concentration has also been carried out, provided that this is an active specie with particularly high germicide power. The effectiveness treatment of the E. coli bacteria growth inhibition by the proposed plasma source reached 99% when a 10 3 CFU/mL concentration on an agar plate had been exposed during ten minutes.

  13. Simulation of dust voids in complex plasmas

    Science.gov (United States)

    Goedheer, W. J.; Land, V.

    2008-12-01

    In dusty radio-frequency (RF) discharges under micro-gravity conditions often a void is observed, a dust free region in the discharge center. This void is generated by the drag of the positive ions pulled out of the discharge by the electric field. We have developed a hydrodynamic model for dusty RF discharges in argon to study the behaviour of the void and the interaction between the dust and the plasma background. The model is based on a recently developed theory for the ion drag force and the charging of the dust. With this model, we studied the plasma inside the void and obtained an understanding of the way it is sustained by heat generated in the surrounding dust cloud. When this heating mechanism is suppressed by lowering the RF power, the plasma density inside the void decreases, even below the level where the void collapses, as was recently shown in experiments on board the International Space Station. In this paper we present results of simulations of this collapse. At reduced power levels the collapsed central cloud behaves as an electronegative plasma with corresponding low time-averaged electric fields. This enables the creation of relatively homogeneous Yukawa balls, containing more than 100 000 particles. On earth, thermophoresis can be used to balance gravity and obtain similar dust distributions.

  14. Plasma Immersion Ion Implantation in Radio Frequency Plasma

    International Nuclear Information System (INIS)

    Bora, B.; Bhuyan, H.; Wyndham, E.

    2013-01-01

    Plasma immersion ion implantation (PIII) has attracted wide interests since it emulates conventional ion-beam ion implantation (IBII) in niche applications. For instance, the technique has very high throughput, the implantation time is independent of the sample size, and samples with an irregular shape can be implanted without complex beam scanning or sample manipulation. For uniform ion implantation and deposition on to different substrates, like silicon, stainless steel etc., a capacitive coupled Radio frequency (RF), 13.6 MHz, plasma is used. During the PIII process, the physical parameters which are expected to play crucial rule in the deposition process like RF power, Negative pulse voltage and pulse duration, gas type and gas mixture, gas flow rates and the implantation dose are studied. The ion dose is calculated by dynamic sheath model and the plasma parameters are calculated from the V-I characteristic and power balance equation by homogeneous model of rf plasma discharge considering Ohmic as well as Stochastic heating. The correlations between the yield of the implantation process and the physical parameters as well as plasma parameters are discussed. (author)

  15. High plasma rotation velocity and density transitions by biased electrodes in RF produced, magnetized plasma

    International Nuclear Information System (INIS)

    Matsuyama, Shoichiro; Shinohara, Shunjiro

    2001-01-01

    A large density profile modification was successfully obtained by voltage biasing to electrodes inserted in a RF (radio frequency) produced, magnetized plasma, and formation of strong shear of azimuthal plasma rotation velocity in a supersonic regime was found. For the case of biasing to an electrode near the central plasma region, two types of density transitions were observed in the outer plasma region: one was an oscillatory transition between two states, and the other was a transition from high to low density states with a large reduction of density fluctuations. (author)

  16. High plasma rotation velocity and density transitions by biased electrodes in RF produced, magnetized plasma

    Energy Technology Data Exchange (ETDEWEB)

    Matsuyama, Shoichiro; Shinohara, Shunjiro [Kyushu Univ., Interdisciplinary Graduate School of Engineering Sciences, Fukuoka (Japan)

    2001-07-01

    A large density profile modification was successfully obtained by voltage biasing to electrodes inserted in a RF (radio frequency) produced, magnetized plasma, and formation of strong shear of azimuthal plasma rotation velocity in a supersonic regime was found. For the case of biasing to an electrode near the central plasma region, two types of density transitions were observed in the outer plasma region: one was an oscillatory transition between two states, and the other was a transition from high to low density states with a large reduction of density fluctuations. (author)

  17. Plasma processing of large curved surfaces for superconducting rf cavity modification

    Directory of Open Access Journals (Sweden)

    J. Upadhyay

    2014-12-01

    Full Text Available Plasma-based surface modification of niobium is a promising alternative to wet etching of superconducting radio frequency (SRF cavities. We have demonstrated surface layer removal in an asymmetric nonplanar geometry, using a simple cylindrical cavity. The etching rate is highly correlated with the shape of the inner electrode, radio-frequency (rf circuit elements, gas pressure, rf power, chlorine concentration in the Cl_{2}/Ar gas mixtures, residence time of reactive species, and temperature of the cavity. Using variable radius cylindrical electrodes, large-surface ring-shaped samples, and dc bias in the external circuit, we have measured substantial average etching rates and outlined the possibility of optimizing plasma properties with respect to maximum surface processing effect.

  18. Directional rf probe for measurement of conductivity of flowing plasmas

    International Nuclear Information System (INIS)

    Jayakumar, R.; Chakravarthy, D.P.; Rohatgi, V.K.

    1977-01-01

    An electrodeless immersible rf probe for measurement of plasma conductivity in the range 0.01 to 100 mho/m has been designed and fabricated. The probe, with an overall diameter of 11 mm, employs unidirectional electromagnetic field lines which reduce the inaccuracies caused by insertion of the probe in a flowing plasma. In the range studied the probe output shows a linear relationship with the conductivity of the medium. Such probes are of interest in the study of MHD and reentry plasmas

  19. Radio Frequency Underwater Discharge Operation and Its Application to Congo Red Degradation

    International Nuclear Information System (INIS)

    Ji Liangliang; Zou Shuai; Shen Mingrong; Xin Yu

    2012-01-01

    Radio frequency (RF) underwater discharge operation was performed for different liquid conductivities driven by different frequencies ranging from 13.56 MHz to 60 MHz, and its application to organic degradation was investigated. The RF underwater discharge was observed to be generated within the bubble at electrode surface formed by RF and plasma heating. It was shown that the sizes of the bubbles and plasmas increased as the driving frequency and the input power went up. The breakdown voltage decreased rapidly with the increase of the water conductivity and driving frequency. Comparative experiments of the UV-VIS absorbance spectra of Congo Red solution before and after discharge suggested effective degradation of the organic dye due to the active species generated during the discharge, such as ·OH, ·O, ·H, etc. revealed by optical emission spectroscopy. The results show that higher exciting frequency and lower conductivity of the solution are more effective for organic degradation. With the combination of Fourier Transform Infrared Spectroscopy (FT-IR) and Liquid Chromatography-Mass Spectrometry (LC-MS) data, one possible degradation process was proposed and the main conceivable components and structures of the products were also presented.

  20. Operation of Ferroelectric Plasma Sources in a Gas Discharge Mode

    International Nuclear Information System (INIS)

    Dunaevsky, A.; Fisch, N.J.

    2004-01-01

    Ferroelectric plasma sources in vacuum are known as sources of ablative plasma, formed due to surface discharge. In this paper, observations of a gas discharge mode of operation of the ferroelectric plasma sources (FPS) are reported. The gas discharge appears at pressures between approximately 20 and approximately 80 Torr. At pressures of 1-20 Torr, there is a transition from vacuum surface discharge to the gas discharge, when both modes coexist and the surface discharges sustain the gas discharge. At pressures between 20 and 80 Torr, the surface discharges are suppressed, and FPS operate in pure gas discharge mode, with the formation of almost uniform plasma along the entire surface of the ceramics between strips. The density of the expanding plasma is estimated to be about 1013 cm-3 at a distance of 5.5 mm from the surface. The power consumption of the discharge is comparatively low, making it useful for various applications. This paper also presents direct measurements of the yield of secondary electron emission from ferroelectric ceramics, which, at low energies of primary electrons, is high and dependent on the polarization of the ferroelectric material

  1. Electrical and spectroscopic characterization of a surgical argon plasma discharge

    International Nuclear Information System (INIS)

    Keller, Sandra; Neugebauer, Alexander; Bibinov, Nikita; Awakowicz, Peter

    2013-01-01

    For electrosurgical procedures, the argon plasma coagulation (APC) discharge is a well-established atmospheric-pressure plasma tool for thermal haemostasis and devitalization of biological tissue. To characterize this plasma source, voltage-current measurements, microphotography, optical emission spectroscopy and numerical simulation are applied. Two discharge modes are established during the operation of the APC plasma source. A short transient spark discharge is ignited within the positive half period of the applied high voltage after a streamer channel connects the APC probe and the counter-electrode. During the second phase, which continues under negative high voltage, a glow discharge is stabilized in the plasma channel.

  2. Experimental Investigation on the Characteristics of Sliding Discharge Plasma Aerodynamic Actuation

    International Nuclear Information System (INIS)

    Song Huimin; Zhang Qiaogen; Li Yinghong; Jia Min; Wu Yun

    2011-01-01

    A new electrical discharge called sliding discharge was developed to generate plasma aerodynamic actuation for flow control. A microsecond-pulse high voltage with a DC component was used to energize a three-electrode actuator to generate sliding discharge. The characteristics of plasma aerodynamic actuation by sliding discharge were experimentally investigated. Discharge morphology shows that sliding discharge is formed when energized by properly adjusting microsecond-pulse and DC voltage. Compared to dielectric barrier discharge (DBD), the plasma extension of sliding discharge is quasi-diffusive and stable but longer and more intensive. Results from particle image velocimetry (PIV) test indicate that plasma aerodynamic actuation by sliding discharge can induce a ‘starting vortex’ and a quasi-steady ‘near-wall jet’. Body force induced by plasma aerodynamic actuation is about the order of mN, which is stronger than that induced by single DBD. It is inferred that microsecond-pulse sliding discharge may be more effective to generate large-scale plasma aerodynamic actuation, which is very promising for improving aircraft aerodynamic characteristics and propulsion efficiency.

  3. Experimental Investigation on the Characteristics of Sliding Discharge Plasma Aerodynamic Actuation

    Science.gov (United States)

    Song, Huimin; Li, Yinghong; Zhang, Qiaogen; Jia, Min; Wu, Yun

    2011-10-01

    A new electrical discharge called sliding discharge was developed to generate plasma aerodynamic actuation for flow control. A microsecond-pulse high voltage with a DC component was used to energize a three-electrode actuator to generate sliding discharge. The characteristics of plasma aerodynamic actuation by sliding discharge were experimentally investigated. Discharge morphology shows that sliding discharge is formed when energized by properly adjusting microsecond-pulse and DC voltage. Compared to dielectric barrier discharge (DBD), the plasma extension of sliding discharge is quasi-diffusive and stable but longer and more intensive. Results from particle image velocimetry (PIV) test indicate that plasma aerodynamic actuation by sliding discharge can induce a ‘starting vortex’ and a quasi-steady ‘near-wall jet’. Body force induced by plasma aerodynamic actuation is about the order of mN, which is stronger than that induced by single DBD. It is inferred that microsecond-pulse sliding discharge may be more effective to generate large-scale plasma aerodynamic actuation, which is very promising for improving aircraft aerodynamic characteristics and propulsion efficiency.

  4. RF-plasma interactions in the antenna near fields

    Energy Technology Data Exchange (ETDEWEB)

    Colestock, P.; Greene, G.J.; Hosea, J.C.; Phillips, C.K.; Stevens, J.E.; Ono, M.; Wilson, J.R. (Princeton Univ., NJ (USA). Plasma Physics Lab.); D' Ippolito, D.A.; Myra, J.R. (Lodestar Research Corp., Boulder, CO (USA)); Lehrman, I.S. (Grumman Aerospace Corp., Bethpage, NY (USA))

    1990-04-01

    An assessment is made of the various linear and nonlinear mechanisms that are likely to play a role in the near-field of Faraday shielded inductive antennas commonly used in ICRF heating experiments. A number of low-level, but potentially important, RF loss mechanisms have been proposed as candidates to explain the observed surface phenomena and impurity production associated with ICRF. These range from edge heating via linear processes, such as surface wave or Bernstein wave generation to a variety of nonlinear phenomena including parametric decay and RF-driven sheath effects. The various proposed mechanisms will be examined in this work in terms of the available experimental data and an evaluation will be made of the scaling of these phenomena to higher density and temperature plasmas. (orig.).

  5. Surface plasma source with saddle antenna radio frequency plasma generator.

    Science.gov (United States)

    Dudnikov, V; Johnson, R P; Murray, S; Pennisi, T; Piller, C; Santana, M; Stockli, M; Welton, R

    2012-02-01

    A prototype RF H(-) surface plasma source (SPS) with saddle (SA) RF antenna is developed which will provide better power efficiency for high pulsed and average current, higher brightness with longer lifetime and higher reliability. Several versions of new plasma generators with small AlN discharge chambers and different antennas and magnetic field configurations were tested in the plasma source test stand. A prototype SA SPS was installed in the Spallation Neutron Source (SNS) ion source test stand with a larger, normal-sized SNS AlN chamber that achieved unanalyzed peak currents of up to 67 mA with an apparent efficiency up to 1.6 mA∕kW. Control experiments with H(-) beam produced by SNS SPS with internal and external antennas were conducted. A new version of the RF triggering plasma gun has been designed. A saddle antenna SPS with water cooling is fabricated for high duty factor testing.

  6. Spatio-temporal evolution of the dust particle size distribution in dusty argon rf plasmas

    International Nuclear Information System (INIS)

    Killer, Carsten; Mulsow, Matthias; Melzer, André

    2015-01-01

    An imaging Mie scattering technique has been developed to measure the spatially resolved size distribution of dust particles in extended dust clouds. For large dust clouds of micrometre-sized plastic particles confined in an radio frequency (rf) discharge, a segmentation of the dust cloud into populations of different sizes is observed, even though the size differences are very small. The dust size dispersion inside a population is much smaller than the difference between the populations. Furthermore, the dust size is found to be constantly decreasing over time while the particles are confined in an inert argon plasma. The processes responsible for the shrinking of the dust in the plasma have been addressed by mass spectrometry, ex situ microscopy of the dust size, dust resonance measurements, in situ determination of the dust surface temperature and Fourier transform infrared absorption (FT-IR). It is concluded that both a reduction of dust size and its mass density due to outgassing of water and other volatile constituents as well as chemical etching by oxygen impurities are responsible for the observations. (paper)

  7. Mechanism of laser and rf plasma in vibrational nonequilibrium CO-N2 gas mixture

    International Nuclear Information System (INIS)

    Lou Guofeng; Adamovich, Igor V.

    2009-01-01

    This paper investigates the mechanism of plasma created by focused CO laser and rf electric field. The plasma is created in a CO/N 2 environment, at a total pressure of 600 torr. Ionization of the gases occurs by an associative ionization mechanism, in collisions of two highly vibrationally excited molecules. These highly vibrationally excited states are populated by resonance absorption of the CO radiation followed by anharmonic vibration-vibration (V-V) pumping. Moreover N 2 also becomes vibrationally excited due to collisions with vibrationally excited CO. The coupled rf reduced electric field E/N is sufficiently low to prevent electron impact ionization that may create plasma individually, so when a subbreakdown rf field is applied to the plasma, collisions between the free electrons heated by the field and the diatomic species create additional vibrational excitation both in the region occupied by the CO laser beam and outside of the laser beam region. The numerical results show plasma created in both regions (in and out of the CO laser beam region) with the associative ionization mechanism. This suggests a method for creating a stable nonequilibrium plasma. The calculation result is verified by comparison the synthetic spectrum to a measured one.

  8. Discharge behaviors during plasma electrolytic oxidation on aluminum alloy

    International Nuclear Information System (INIS)

    Liu, Run; Wu, Jie; Xue, Wenbin; Qu, Yao; Yang, Chaolin; Wang, Bin; Wu, Xianying

    2014-01-01

    A plasma electrolytic oxidation (PEO) process was performed on the 2024 aluminum alloy in silicate electrolyte to fabricate ceramic coatings under a constant voltage. Optical emission spectroscopy (OES) was employed to evaluate the characteristics of plasma discharge during PEO process. The plasma electron temperature and density were obtained by analyzing the spectral lines of OES, and the atomic ionization degree in discharge zone was calculated in terms of Saha thermal ionization equation. The illumination intensity of plasma discharge and the temperature in the interior of alloy were measured. Combining the surface morphology and cross-sectional microstructure with the optical emission spectra and illumination at different discharge stage, a discharge model in the growth of PEO ceramic coatings was proposed. It is found that there are two discharge modes of type A with small spark size and type B with large spark size, and the latter only appears in the intermediate stage of PEO process. The illumination intensity has a maximum value in the initial stage of oxidation with many sparks of discharge type A. The electron temperature in plasma discharge zone is about 3000 K–7000 K and atomic ionization degree of Al is about 2.0 × 10 −5 –7.2 × 10 −3 , which depend on discharge stage. The discharge type B plays a key role on the electron temperature and atomic ionization degree. The electron density keeps stable in the range of about 8.5 × 10 21  m −3 –2.6 × 10 22  m −3 . - Highlights: • The characteristics of PEO plasma discharge was evaluated by OES. • Electron temperature, concentration, atomic ionization degree were calculated. • Discharge model for the growth of PEO coatings was proposed. • Temperature in the interior of alloy during PEO process was measured

  9. Photoemission starting of induction rf-driven multicusp ion sources

    International Nuclear Information System (INIS)

    Pickard, D.S.; Leung, K.N.; Perkins, L.T.; Ponce, D.M.; Young, A.T.

    1996-01-01

    It has been demonstrated that pulsed and continuous wave, rf-driven hydrogen discharges can be started with photoemission. The extracted H - current from a photoemission-started plasma has been investigated and does not differ significantly from that of a filament-started plasma. The minimum pressure for photoemissive starting was found to be higher than that of filament starting, 17 mTorr compared to 7 mTorr, respectively, in this particular configuration. copyright 1996 American Institute of Physics

  10. Possible effects of RF field near ICRF antenna on density control during long pulse discharge in LHD

    International Nuclear Information System (INIS)

    Saito, K.; Kumazawa, R.; Mutoh, T.; Seki, T.; Watari, T.; Nakamura, Y.; Sakamoto, M.; Noda, N.; Watanabe, T.; Shoji, M.; Masuzaki, S.; Morita, S.; Goto, M.; Torii, Y.; Takeuchi, N.; Shimpo, F.; Nomura, G.; Yokota, M.; Kato, A.; Zhao, Y.

    2005-01-01

    In the large helical device (LHD), the plasma duration time was extended up to 150 s by ion cyclotron range of frequencies (ICRF) heating. Time-integrated total input power reached 71 MJ. However, this discharge terminated due to radiation collapse accompanied by an increase of electron density. The temperature of the divertor plates and the intensity of H α were locally increased in the same toroidal section, near the ICRF antenna. One of the possible causes of the increase of radiation power is an outgassing from the divertor plates that were heated by particles accelerated in the cyclotron resonance layer near the antenna. Another possible cause is the outgassing from the ICRF antenna itself due to a temperature increase of the ICRF antenna owing to high-energy particles, or the formation of an RF (radio frequency) sheath

  11. Hybrid plasma system for magnetron deposition of coatings with ion assistance

    International Nuclear Information System (INIS)

    Vavilin, K V; Kralkina, E A; Nekludova, P A; Petrov, A. K; Nikonov, A M; Pavlov, V B; Airapetov, A A; Odinokov, V V; Pavlov, G Ya; Sologub, V A

    2016-01-01

    The results of the study of the plasma hybrid system based on the combined magnetron discharge and high-frequency inductive discharge located in the external magnetic field is presented. Magnetron discharge provides the generation of atoms and ions of the target materials while the flow of accelerated ions used for the ion assistance is provided by the RF inductive discharge. An external magnetic field is used to optimize the power input to the discharge, to increase the ion current density in the realm of substrate and to enhance the area of uniform plasma. The joint operation of magnetron and RF inductive discharge leads to a substantial increase (not equal to the sum of the parameters obtained under separate operation of two hybrid system channels) of the ion current density and intensity of sputtered material spectral lines radiation. Optimal mode of the hybrid plasma system operation provides uniform ion current density on the diameter of at least 150mm at 0.7PA argon pressure. The optimal values of the magnetic fields in the region of the substrate location lie in the range 2-8 mTl, while in the region of the RF input power unit lie in the range 0.5-25 mTl. (paper)

  12. ICRF plasma production in Tore Supra: analysis of antenna coupling and plasma properties

    International Nuclear Information System (INIS)

    Beaumont, B.; Becoulet, A.; Lyssoivan, A.

    1999-01-01

    A study of RF plasma production frequency range ω. 2ω ci has been undertaken on Tore Supra taking into account antenna coupling predictions of theory and the TEXTOR-94 database. Two scenarios for RF discharges have been tested (fixed frequency of the RF generator): operation with pure toroidal magnetic field, at standard and lower B T and operation in the magnetic configuration with a small vertical (B V ) field superimposed on B T (B V T ). (authors)

  13. Treatment of hazardous wastes by DC thermal plasma arc discharge

    International Nuclear Information System (INIS)

    Toru, Iwao; Yafang, Liu; Furuta, N.; Tsuginori, Inaba

    2001-01-01

    The temperature of the DC thermal plasma arc discharge is discussed, and examples of the waste treatment for the inorganic compounds such as fly ash, asbestos, and for the organic compounds such as the toxic dioxines and TBT by using the DC plasma arc discharge are shown. In addition, the plasma treatment by using a radiant power emitted from the DC plasma arc discharge is also shown as another new kind of ones. (authors)

  14. Theoretical and experimental studies of the magnetic fields of Rotamak discharge

    International Nuclear Information System (INIS)

    Kirolous, H.

    1986-12-01

    In part I of this thesis, the self-generated bi-directional toroidal magnetic field structure which has been observed to exist in previous rotamak discharges is theoretically investigated. A possible explanation for the existence of this self-generated field, which relies on the presence of screening currents in the plasma, is advanced. Experimental studies of the magnetic field structure of a rotamak plasma configuration generated and sustained in a metal discharge vessel by means of a rotating magnetic field are described in part II. The rotating magnetic field was produced by feeding radio frequency (r.f.) currents, dephased by 90 degrees, through two orthogonal coils which were located inside the metal chamber. High power amplifiers were used to supply the r.f. current pulses. The efficiency of the r.f. power transfer to the plasma was maximized by using impedance matching networks. The effect on the rotating magnetic field of eddy currents induced in the conducting vessel has been theoretically and experimentally investigated. Extensive magnetic field measurements have been undertaken on one particular rotamak discharge. Measurements of the penetration of the rotating magnetic field into the plasma were made at various axial positions. The steady magnetic field structure was measured at a matrix of 2640 points and a two dimensional least square polynomial fitting algorithm was used to smooth the measured data. This fitting procedure enabled reliable plots of the poloidal flux and current density contours to be constructed. An attempt has been made to apply MHD equilibrium theory to the observed plasma/field configuration. 23 refs., 99 figs., ills

  15. Verification of high voltage rf capacitive sheath models with particle-in-cell simulations

    Science.gov (United States)

    Wang, Ying; Lieberman, Michael; Verboncoeur, John

    2009-10-01

    Collisionless and collisional high voltage rf capacitive sheath models were developed in the late 1980's [1]. Given the external parameters of a single-frequency capacitively coupled discharge, plasma parameters including sheath width, electron and ion temperature, plasma density, power, and ion bombarding energy can be estimated. One-dimensional electrostatic PIC codes XPDP1 [2] and OOPD1 [3] are used to investigate plasma behaviors within rf sheaths and bulk plasma. Electron-neutral collisions only are considered for collisionless sheaths, while ion-neutral collisions are taken into account for collisional sheaths. The collisionless sheath model is verified very well by PIC simulations for the rf current-driven and voltage-driven cases. Results will be reported for collisional sheaths also. [1] M. A. Lieberman, IEEE Trans. Plasma Sci. 16 (1988) 638; 17 (1989) 338 [2] J. P. Verboncoeur, M. V. Alves, V. Vahedi, and C. K. Birdsall, J. Comp. Phys. 104 (1993) 321 [3] J. P. Verboncoeur, A. B. Langdon and N. T. Gladd, Comp. Phys. Comm. 87 (1995) 199

  16. Effect of power modulation on properties of pulsed capacitively coupled radiofrequency discharges

    International Nuclear Information System (INIS)

    Samara, V; Bowden, M D; Braithwaite, N St J

    2010-01-01

    We describe measurements of plasma properties of pulsed, low pressure, capacitively coupled discharges operated in argon. The study aims to determine the effect of modulating the radiofrequency power during the discharge part of the pulse cycle. Measurements of local electron density and optical emission were made in capacitively coupled rf discharges generated in a Gaseous Electronics Conference (GEC) reference reactor. Gas pressure was in the range 7-70 Pa, rf power in the range 1-100 W and pulse durations in the range 10 μs-100 ms. The results indicate that the ignition and afterglow decay processes in pulsed discharges can be controlled by modulating the shape of applied radiofrequency pulse.

  17. Dynamics of the plasma current sheath in plasma focus discharges in different gases

    Energy Technology Data Exchange (ETDEWEB)

    Vinogradov, V. P.; Krauz, V. I., E-mail: krauz-vi@nrcki.ru [National Research Center Kurchatov Institute (Russian Federation); Mokeev, A. N. [Project Center ITER (Russian Federation); Myalton, V. V.; Kharrasov, A. M. [National Research Center Kurchatov Institute (Russian Federation)

    2016-12-15

    The shape of the plasma current sheath (PCS) in the final stage of its radial compression, the dynamics of pinching, and the subsequent pinch decay in plasma focus (PF) discharges in different gases are studied using an improved multichannel system of electron-optical plasma photography and a newly elaborated synchronization system. The PCS structure in discharges in heavy gases (Ne, Ar) is found to differ significantly from that in discharges in hydrogen and deuterium. The influence of a heavy gas (Xe) additive to hydrogen and deuterium on the structure and compression dynamics of the PCS is investigated.

  18. Comparison of macroscopic properties of electrons in plasmas of beam-plasma and glow discharges

    International Nuclear Information System (INIS)

    Winkler, R.; Wilhelm, J.; Starykh, V.V.

    1979-01-01

    The theoretical basis of the comparison are adequate Boltzmann equations for the electron component of the beam discharge plasma and the glow discharge plasma. We included the turbulent field or the direct electric field in the mentioned plasma types and all important binary collision processes as well as the Coulomb interaction between the charged particles. The comparison was performed in hydrogen under the condition of equal power input per volumen unit of both plasmas in dependence of the turbulence energy per one electron U, for the ionization degree (nsub(e)/N)sub(g) = 10 -6 and the pressure p 0 sup(g) = 1 Torr of the glow discharge plasma and for the ionization degrees (nsub(e)/N)sub(b) = 10 -3 , 10 -2 , 10 -1 and the pressure p 0 sup(b) = 10 -2 Torr of the beam discharge plasma which are typical for the existence of both plasma types. Based upon the numerical solutions of the Boltzmann equations under the mentioned additional conditions we compared the energy distribution functions of the electrons, the mean energy and the power losses of the electrons due to the different collision processes with the molecules and the ions. Especially a law for similarity of the electron kinetics of the two collision dominated plasma types was found and the main channels for the transfer of the field energy in both plasmas were determined. The results obtained were applied for assesing the perspectives of the beam discharged plasma as a plasmachemical reactor. (author)

  19. Plasma Beam Interaction with Negative glow discharge

    International Nuclear Information System (INIS)

    El-Tayeb, H.A.; El-Gamal, H.A.

    2000-01-01

    A miniature coaxial gun has been used to study the effect of the energy spectrum of the ejected plasma on the interaction with negative glow region in a normal glow discharge. The peak discharge current flow between the coaxial electrodes was 5.25 K A as a single pulse with pulse duration of 60 MUs. Investigations are carried out with argon gas at pressure 0.4 Torr. The sheath thickness of the ejected plasma from the coaxial discharge was 6 cm with different densities and energies. The spectrum of electron energy varies between 6 eV and 1 eV, while the electron density varies between 5 x 10 12 cm -3 and 4x10 13 cm -3 . The peak velocity of the ejected plasma was 0. 8 x 10 5 cm sec -1 in the neutral argon atoms. Argon negative glow region used as base plasma has an electron temperature of 2.2 eV and electron density of 6.2 x10 7 cm -3 . It had been found that the velocity of the ejected plasma decreased when it moves in the negative glow region and its mean electron temperature decreased. The results are compared with the theory of beam interaction with cold plasma

  20. Stabilizing effect of plasma discharge on bubbling fluidized granular bed

    International Nuclear Information System (INIS)

    Hu Mao-Bin; Dang Sai-Chao; Ma Qiang; Xia Wei-Dong

    2015-01-01

    Fluidized beds have been widely used for processing granular materials. In this paper, we study the effect of plasma on the fluidization behavior of a bubbling fluidized bed with an atmospheric pressure plasma discharger. Experiment results show that the bubbling fluidized bed is stabilized with the discharge of plasma. When the discharge current reaches a minimum stabilization current C ms , air bubbles in the bed will disappear and the surface fluctuation is completely suppressed. A simplified model is proposed to consider the effect of electric Coulomb force generated by the plasma. It is found that the Coulomb force will propel the particles to move towards the void area, so that the bubbling fluidized bed is stabilized with a high enough plasma discharge. (paper)

  1. Discharge current characteristics as an 'electrical method' for glow discharge plasma diagnosis

    International Nuclear Information System (INIS)

    Toma, M.; Paraschivescu, Alina; Morminches, Anisoara

    2001-01-01

    In its simplest form, the glow discharge can be established by passing an electric current through gas between two electrodes. The gas and the electrodes are contained in an insulating envelope. In many technological applications, and not only, the plasma devices are often treated like a black box. There is a series of external parameters or control variables which can be adjusted to obtain a desired effect, namely, the operating voltage, gas pressure, gas nature, gas flow rate, magnetic field strength and magnetic field configuration, electric field geometry, interelectrode distance, and cathode characteristics. The discharge current can be controlled by each of the above control variables. The core idea of this work is the following: a lot of information about the phenomena from the discharge volume, at electrodes or at the discharge bounding wall surface, can be obtained knowing how the change of one of the control parameters influences the discharge current. The following regimes were analyzed: dark discharges (background ionization, saturation regime, Townsend regime, corona regime), glow discharge (the normal and abnormal discharge) and arc discharge (glow to arc transition, non-thermal arcs, thermal arcs). It was concluded that the nonlinearity in the shape of the discharge current characteristics as a function of an external control parameter, can be correlated with the elementary processes and the dynamics of different space charge structures generated in plasma devices. (authors)

  2. Ion flux nonuniformities in large-area high-frequency capacitive discharges

    International Nuclear Information System (INIS)

    Perret, A.; Chabert, P.; Booth, J.-P.; Jolly, J.; Guillon, J.; Auvray, Ph.

    2003-01-01

    Strong nonuniformities of plasma production are expected in capacitive discharges if the excitation wavelength becomes comparable to the reactor size (standing-wave effect) and/or if the plasma skin depth becomes comparable to the plate separation (skin effect) [M. A. Lieberman et al., Plasma Sources Sci. Technol. 11, 283 (2002)]. Ion flux uniformity measurements were carried out in a large-area square (40 cmx40 cm) capacitive discharge driven at frequencies between 13.56 MHz and 81.36 MHz in argon gas at 150 mTorr. At 13.56 MHz, the ion flux was uniform to ±5%. At 60 MHz (and above) and at low rf power, the standing-wave effect was seen (maximum of the ion flux at the center), in good quantitative agreement with theory. At higher rf power, maxima of the ion flux were observed at the edges, due either to the skin effect or to other edge effects

  3. R. F. plasmoids and resonant discharges; Plasmoides a haute frequence et decharges resonnantes

    Energy Technology Data Exchange (ETDEWEB)

    Taillet, J. [Commissariat a l' Energie Atomique, Saclay (France). Centre d' Etudes Nucleaires

    1964-06-15

    In R.F. discharges at reduced pressure a resonance can increase by an order of magnitude the intensity of the plasma R.F. electric field. The electron density of the plasma adjusts itself to keep the resonant frequency equal to the excitation frequency. This behaviour has been observed by an electron beam technique. When such a discharge is excited in electronegative gases, the negative ion density may be higher than the electron density. Therefore, the D.C. potential distribution in plasma and sheath is modified. The plasma appears as a luminous body isolated from the walls by a large sheath (R.F. plasmoid). (author) [French] Dans les decharges H.F. a faible pression une resonance peut elever d'un ordre de grandeur l'intensite du champ electrique interne du plasma. La densite electronique s'ajuste elle-meme de facon a rendre egales la frequence d'excitation et la frequence de la resonance. Ce mecanisme a ete observe a l'aide de faisceaux electroniques. Lorsqu'une telle decharge est excitee dans un gaz electronegatif, la densite des ions negatifs peut etre plus elevee, que la densite electronique, ce qui modifie la distribution du potentiel continu dans le plasma et la gaine. Le plasma apparait comme un corps lumineux isole des parois par une large gaine (plasmoide a haute frequence). (auteur)

  4. R. F. plasmoids and resonant discharges; Plasmoides a haute frequence et decharges resonnantes

    Energy Technology Data Exchange (ETDEWEB)

    Taillet, J [Commissariat a l' Energie Atomique, Saclay (France). Centre d' Etudes Nucleaires

    1964-06-15

    In R.F. discharges at reduced pressure a resonance can increase by an order of magnitude the intensity of the plasma R.F. electric field. The electron density of the plasma adjusts itself to keep the resonant frequency equal to the excitation frequency. This behaviour has been observed by an electron beam technique. When such a discharge is excited in electronegative gases, the negative ion density may be higher than the electron density. Therefore, the D.C. potential distribution in plasma and sheath is modified. The plasma appears as a luminous body isolated from the walls by a large sheath (R.F. plasmoid). (author) [French] Dans les decharges H.F. a faible pression une resonance peut elever d'un ordre de grandeur l'intensite du champ electrique interne du plasma. La densite electronique s'ajuste elle-meme de facon a rendre egales la frequence d'excitation et la frequence de la resonance. Ce mecanisme a ete observe a l'aide de faisceaux electroniques. Lorsqu'une telle decharge est excitee dans un gaz electronegatif, la densite des ions negatifs peut etre plus elevee, que la densite electronique, ce qui modifie la distribution du potentiel continu dans le plasma et la gaine. Le plasma apparait comme un corps lumineux isole des parois par une large gaine (plasmoide a haute frequence). (auteur)

  5. Theory of a wall sheath in a gas-discharge plasma

    International Nuclear Information System (INIS)

    Dvinin, S.A.; Dovzhenko, V.A.; Kuzovnikov, A.A.

    1999-01-01

    An integro-differential equation is proposed that generalizes the plasma-sheath (Langmuir-Tonks) equation to include charge exchange between ions and neutrals in a discharge plasma and makes it possible to correctly analyze how the discharge evolves from the regime of collisionless ion motion to the diffusive regime in pure gases with allowance for the space charge in the sheath at the plasma boundary. The integro-differential equation is solved numerically, and the ionization rate is calculated as a function of the ratio between the ion mean free path and the characteristic discharge dimension. The ion energy distribution function in the positive column of a discharge plasma is computed. The parameter range in which the positive column can exist is examined, and the limits of applicability of different discharge models are analyzed depending on the relations between the ion mean free path, Debye length, and discharge dimension

  6. Space structure of the glow discharge with free side boundary

    International Nuclear Information System (INIS)

    Yatsenko, N.A.

    1995-01-01

    The main purpose of this work is to reveal physical reasons, which are responsible for the formation of space structure of glow type discharge with free side boundary, both in DC and in RF electric fields. By now extensive experimental material have been accumulated in discharge physics. Also many theoretical models have been proposed for describing separate parts of discharge with the cold electrodes (cathode and anode regions, positive column and transition zones - glow luminescence and Farraday's dark space of DC-discharge, electrode regions and plasma column of RF capacitive discharge). As this takes place, the majority of known works are devoted to some one part of gas discharge - positive column, electrode regions, transition zones and so on. At the same time just now we don't know anything about space structure of free, steady-state gas discharge of glow type, as a whole, especially when the pressure p much-gt 1 Torr

  7. Electrical Characterization of an RF Glow Discharge at Room Pressure

    International Nuclear Information System (INIS)

    Perez-Martinez, J. A.; Piedad-Beneitez, A. de la; Pena-Eguiluz, R.; Mercado-Cabrera, A.; Valencia A, R.; Barocio, S. R.; Lopez-Callejas, R.; Godoy-Cabrera, O. G.; Benitez-Read, J. S.; Pacheco-Sotelo, J. O.

    2006-01-01

    A non-thermal atmospheric-like plasma source able to operate at room temperature represents, by its physical nature, a considerable potential for biological applications, given its highly accurate action and extremely controllable penetration on the surface of biological tissue. As we start up a research line into this technology, we report the electrical characterization of a room pressure plasma discharge by means of a coupling network model. The discharge is produced by a 13.56MHz commercial generator. As it is impossible to measure directly its state variables (voltage and current intensity) due to the considerable perturbation created by introducing a low impedance at the system output, then an indirect estimation of such variables is achieved from experimental diagnostics at the input, so to validate the proposed electrical model

  8. Influence of ECR-RF plasma modification on surface and thermal properties of polyester copolymer

    Directory of Open Access Journals (Sweden)

    Fray Miroslawa El

    2015-12-01

    Full Text Available In this paper we report a study on influence of radio-frequency (RF plasma induced with electron cyclotron resonance (ECR on multiblock copolymer containing butylene terephthalate hard segments (PBT and butylene dilinoleate (BDLA soft segments. The changes in thermal properties were studied by DSC. The changes in wettability of PBT-BDLA surfaces were studied by water contact angle (WCA. We found that ECR-RF plasma surface treatment for 60 s led to decrease of WCA, while prolonged exposure of plasma led to increase of WCA after N2 and N2O2 treatment up to 70°–80°. The O2 reduced the WCA to 50°–56°. IR measurements confirmed that the N2O2 plasma led to formation of polar groups. SEM investigations showed that plasma treatment led to minor surfaces changes. Collectively, plasma treatment, especially O2, induced surface hydrophilicity what could be beneficial for increased cell adhesion in future biomedical applications of these materials.

  9. Process Performances of 2 ns Pulsed Discharge Plasma

    Science.gov (United States)

    Matsumoto, Takao; Wang, Douyan; Namihira, Takao; Akiyama, Hidenori

    2011-08-01

    Pulsed discharge plasmas have been used to treat exhaust gases. Since pulse duration and the rise time of applied voltage to the discharge electrode has a strong influence on the energy efficiency of pollutant removal, the development of a short-pulse generator is of paramount importance for practical applications. In this work, it is demonstrated that the non thermal plasma produced by the 2 ns pulsed discharge has a higher energy efficiency than the 5 ns pulsed discharge plasma for NO removal and ozone generation. Typically, the NO removal efficiency was 1.0 mol kW-1 h-1 for 70% NO removal (initial NO concentration = 200 ppm, gas flow = 10 L/min). Meanwhile, the ozone yield was 500 g kW-1 h-1 for 20 g/m3 ozone concentration in the case of oxygen feeding. These energy efficiencies are the highest in the literature.

  10. Plasma Structure and Behavior of Miniature Ring-Cusp Discharges

    Science.gov (United States)

    Mao, Hann-Shin

    Miniature ring-cusp ion thrusters provide a unique blend of high efficiencies and millinewton level thrust for future spacecraft. These thrusters are attractive as a primary propulsion for small satellites that require a high delta V, and as a secondary propulsion for larger spacecraft that require precision formation flying, disturbance rejection, or attitude control. To ensure desirable performance throughout the life of such missions, an advancement in the understanding of the plasma structure and behavior of miniature ring-cusp discharges is required. A research model was fabricated to provide a simplified experimental test bed for the analysis of the plasma discharge chamber of a miniature ion thruster. The plasma source allowed for spatially resolved measurements with a Langmuir probe along a meridian plane. Probe measurements yielded plasma density, electron temperature, and plasma potential data. The magnetic field strength was varied along with the discharge current to determine the plasma behavior under various conditions. The structure of the plasma properties were found to be independent of the discharge power under the proper scaling. It was concluded that weaker magnetic fields can improve the overall performance for ion thruster operation. To further analyze the experimental measurements, a framework was developed based on the magnetic field. A flux aligned coordinate system was developed to decouple the perpendicular and parallel plasma motion with respect to the magnetic field. This was done using the stream function and magnetic scalar potential. Magnetic formulae provided intuition on the field profiles dependence on magnet dimensions. The flux aligned coordinate system showed that the plasma was isopycnic along constant stream function values. This was used to develop an empirical relation suitable for estimating the spatial behavior and to determine the plasma volume and loss areas. The plasma geometry estimates were applied to a control volume

  11. RF plasma parameter determination by a Langmuir multipoint double probe array

    International Nuclear Information System (INIS)

    Rojas-Olmedo, I A; López-Callejas, R; De la Piedad-Beneitez, A; Valencia-Alvarado, R; Peña-Eguiluz, R; Mercado-Cabrera, A; Barocio, S R; Muñoz-Castro, A E; Rodríguez-Méndez, B G

    2012-01-01

    A multipoint double Langmuir (MDL) probe system, which is exempt from interference, has been designed and assembled to be applied to an RF plasma. The system provides the measurement of fundamental plasma parameters such as density, temperature, plasma potential, etc. on the basis of the Bohm Approximation Theory and the Orbital Movement Limit. Thus, one pair of the MDL system is selected so as to consider the right plasma parameters within the prevailing pressure-power intervals. Both the hardware and software of the system have been applied to the modification of material properties by means of the PIII process.

  12. The measurement and analysis of electric fields in glow discharge plasmas

    International Nuclear Information System (INIS)

    Lawler, J.E.; Doughty, D.A.

    1994-01-01

    Interest in glow discharge plasmas has remained high for many decades because of their widespread application as a source of incoherent and coherent light, in plasma processing materials, in pulsed power devices, and in other technologies. Plasma etching of semiconductors and various plasma deposition process emerged as major applications during the 1980s. The technological significance of plasma processing is described in Plasma Processing of Materials. More fundamental work on glow discharges also advanced greatly during the 1980s. For example, substantial progress was made through the use of laser diagnostics to study glow discharges and as a result of the dramatically increased computing power that became available in the 1980s to model glow discharges. Many of the laser diagnostics are described in Radiative Processes in Discharge Plasmas. Kinetic theory models, in particular, became far more sophisticated and realistic during the 1980s. This article is a review of recent work that used optical diagnostics to study electric fields in glow discharge plasmas. Alternative methods for measuring electric electric fields in plasmas include electron beam deflection and electrostatic probes. Optical techniques have important advantages over these methods: They can be used at higher pressures and discharge current densities than electron beam deflection; and they are noninvasive, unlike electrostatic probes. In addition, optical techniques are usually easier to apply in a highly pure system than either of the alternative methods. 46 refs., 23 figs., 1 tab

  13. RF generated currents in a magnetized plasma using a slow wave structure

    International Nuclear Information System (INIS)

    Poole, B.R.; Cheo, B.R.; Kuo, S.P.; Tang, M.G.

    1983-01-01

    The generation of a dc current in a plasma by using RF waves is of importance for the operation of steadystate toroidal devices. An experimental investigation in the use of unidirectional, low frequency RF waves to drive currents has been made. Instead of using a natural plasma wave a slow wave guiding structure is used along the entire length of the plasma. When the RF wave is injected an increase in ionization and T/sub e/, and hence the background current is observed. However, the change depends on wave direction: The +k/sub z/ excitation yields a much larger electron current compared with the -k/sub z/ excitation indicating a net wave driven current. The measured modification in electron density and T/sub e/ is independent of wave direction. The current with a standing wave excitation generally falls at the average of the travelling wave (+ or - k/sub z/) driven currents. The net wave driven current is proportional to the feed power at approx. = 10 mA/kW. No saturation of the current is observed with feed powers up to 1 kW. Since the exciting structure is only 1 wavelength long, its k/sub z/ spectrum is relatively broad and hence no sharp resonances are observed as various plasma parameters and B/sub O/ are changed. There is no measurable difference between the power absorbed by the load resistors and the input power to the slow wave structure. Thus the current is driven by the wave field exclamation E exclamation 2 rather than the power absorbed in the plasma. The theoretical background and the physical mechanism is presented

  14. Ignition Features of Plasma-Beam Discharge in Gas-Discharge Electron Gun Operation

    Directory of Open Access Journals (Sweden)

    Valery A. Tutyk

    2013-01-01

    Full Text Available The current paper presents the results of experimental researches to determine the mode features of plasma-beam discharge (PBD generation by an electron beam injected by a low-vacuum gasdischarge electron gun (LGEG with the cold cathode and hollow anode on the basis of the high-voltage glow discharge and in the range of helium pressure of P ? 10 ÷ 130 Pa. The PBD boundaries and their dependences on parameters of an electron beam are found. The influence of PBD on parameters of low-vacuum gas-discharge electron gun is revealed. It causes an avalanche increase of electron beam current and burning of plasma-beam discharge in the whole space of the vacuum chamber volume and generation of electromagnetic radiation is revealed. Achieved results will be used for implementation of various vacuum technologies in the medium of reaction gas and generated electromagnetic radiation.

  15. Density measurements in the boundary layer of the ASDEX RF heated plasma

    International Nuclear Information System (INIS)

    El Shaer, M.

    1986-11-01

    The boundary layer in the main chamber of ASDEX is diagnosed using a movable 2.2 mm microwave interferometer. The measured radial density profile decreases exponentially outside of the separatrix with three different e-folding lengths, the middle part of the profile is flatter with a larger e-folding length. The boundary density increases proportionally to the increase of the main plasmy density near the separatrix, far from the separatrix this increase is weaker. The boundary density increases with the increase of the main magnetic field in the discharge. With the application of the RF heating at the lower hybrid frequency the boundary density is submitted to a large modification. The behavior of this modification in the density profile depends on the rate of injection of the cold feeding gas. In the discharge with a constant or decreasing gas feeding rate the density profile flattens, and with an increasing rate it steepens when the RF pulse is applied. (orig.)

  16. Coincident ion acceleration and electron extraction for space propulsion using the self-bias formed on a set of RF biased grids bounding a plasma source

    International Nuclear Information System (INIS)

    Rafalskyi, D; Aanesland, A

    2014-01-01

    We propose an alternative method to accelerate ions in classical gridded ion thrusters and ion sources such that co-extracted electrons from the source may provide beam space charge neutralization. In this way there is no need for an additional electron neutralizer. The method consists of applying RF voltage to a two-grid acceleration system via a blocking capacitor. Due to the unequal effective area of the two grids in contact with the plasma, a dc self-bias is formed, rectifying the applied RF voltage. As a result, ions are continuously accelerated within the grid system while electrons are emitted in brief instants within the RF period when the RF space charge sheath collapses. This paper presents the first experimental results and a proof-of-principle. Experiments are carried out using the Neptune thruster prototype which is a gridded Inductively Coupled Plasma (ICP) source operated at 4 MHz, attached to a larger beam propagation chamber. The RF power supply is used both for the ICP discharge (plasma generation) and powering the acceleration grids via a capacitor for ion acceleration and electron extraction without any dc power supplies. The ion and electron energies, particle flux and densities are measured using retarding field energy analyzers (RFEA), Langmuir probes and a large beam target. The system operates in Argon and N 2 . The dc self-bias is found to be generated within the gridded extraction system in all the range of operating conditions. Broad quasi-neutral ion-electron beams are measured in the downstream chamber with energies up to 400 eV. The beams from the RF acceleration method are compared with classical dc acceleration with an additional external electron neutralizer. It is found that the two acceleration techniques provide similar performance, but the ion energy distribution function from RF acceleration is broader, while the floating potential of the beam is lower than for the dc accelerated beam. (paper)

  17. Plasma chemistry in wire chambers

    International Nuclear Information System (INIS)

    Wise, J.

    1990-05-01

    The phenomenology of wire chamber aging is discussed and fundamentals of proportional counters are presented. Free-radical polymerization and plasma polymerization are discussed. The chemistry of wire aging is reviewed. Similarities between wire chamber plasma (>1 atm dc-discharge) and low-pressure rf-discharge plasmas, which have been more widely studied, are suggested. Construction and use of a system to allow study of the plasma reactions occurring in wire chambers is reported. A proportional tube irradiated by an 55 Fe source is used as a model wire chamber. Condensable species in the proportional tube effluent are concentrated in a cryotrap and analyzed by gas chromatography/mass spectrometry. Several different wire chamber gases (methane, argon/methane, ethane, argon/ethane, propane, argon/isobutane) are tested and their reaction products qualitatively identified. For all gases tested except those containing methane, use of hygroscopic filters to remove trace water and oxygen contaminants from the gas resulted in an increase in the average molecular weight of the products, consistent with results from low-pressure rf-discharge plasmas. It is suggested that because water and oxygen inhibit polymer growth in the gas phase that they may also reduce polymer deposition in proportional tubes and therefore retard wire aging processes. Mechanistic implications of the plasma reactions of hydrocarbons with oxygen are suggested. Unresolved issues in this work and proposals for further study are discussed

  18. Central peaking of magnetized gas discharges

    International Nuclear Information System (INIS)

    Chen, Francis F.; Curreli, Davide

    2013-01-01

    Partially ionized gas discharges used in industry are often driven by radiofrequency (rf) power applied at the periphery of a cylinder. It is found that the plasma density n is usually flat or peaked on axis even if the skin depth of the rf field is thin compared with the chamber radius a. Previous attempts at explaining this did not account for the finite length of the discharge and the boundary conditions at the endplates. A simple 1D model is used to focus on the basic mechanism: the short-circuit effect. It is found that a strong electric field (E-field) scaled to electron temperature T e , drives the ions inward. The resulting density profile is peaked on axis and has a shape independent of pressure or discharge radius. This “universal” profile is not affected by a dc magnetic field (B-field) as long as the ion Larmor radius is larger than a

  19. Study of gliding arc discharge plasma

    International Nuclear Information System (INIS)

    Yang Chi; Lin Lie; Wu Bin

    2006-01-01

    The electric parameters change during discharge is studied and the relationship between non-equilibrium degree and parameters is discussed for gliding arc discharges. Using two-channel model, the rules of arc moving due to effect of the airflow is simulated. The numerical simulation results can help analyzing the generation mechanism of gliding arc non-equilibrium plasma. (authors)

  20. Time-resolved measurements of highly-polymerised negative ions in rf silane plasma deposition experiments

    International Nuclear Information System (INIS)

    Howling, A.A.; Sansonnens, L.; Dorier, J.L.; Hollenstein, C.

    1993-07-01

    The time-resolved fluxes of negative polysilicon hydride ions from a power-modulated rf silane plasma have been measured by quadrupole mass spectrometry and modeled using a simple polymerisation scheme. Experiments were performed with plasma parameters suitable for high-quality amorphous silicon deposition. Polysilicon hydride anions diffuse from the plasma with low energy (approximately 0.5 eV) during the afterglow after the electron density has decayed and the sheath fields have collapsed. The mass-dependence of the temporal behavior of the anion loss flux demonstrates that the plasma composition is influenced by the modulation frequency. The negative species attain much higher masses than the positive or neutral species, and anions containing as many as sixteen silicon atoms have been observed, corresponding to the 500 amu limit of the mass spectrometer. This suggests that negative ions could be the precursors to particle formation. Ion-molecule and ion-ion reactions are discussed and a simple negative ion polymerisation scheme is proposed which qualitatively reproduces the experimental results. The model shows that the densities of high mass negative ions in the plasma are strongly reduced by modulation frequencies near 1 kHz. Each plasma period is then too short for the polymerisation chain to propagate to high masses before the elementary anions are lost in each subsequent afterglow period. This explains why modulation of the rf power can reduce particle contamination. We conclude that, for the case of silane rf plasmas, the initiation steps which ultimately lead to particle contamination proceed by negative ion polymerisation. (author) 15 figs., 72 refs

  1. Mode transition of power dissipation and plasma parameters in an asymmetric capacitive discharge

    International Nuclear Information System (INIS)

    Lee, Soo-Jin; Lee, Hyo-Chang; Bang, Jin-young; Oh, Seung-Ju; Chung, Chin-Wook

    2013-01-01

    Electrical characteristics and plasma parameters were experimentally investigated in asymmetric capacitively coupled plasma with various argon gas pressures. At a low discharge current region, the transferred power to the plasma was proportional to the current, while the transferred power increased proportionally to square of the current at a high discharge current region. The mode transition of power dissipation occurred at the lower discharge current region with the high gas pressure. At the low radio-frequency power or low discharge current, the plasma density increased linearly with the discharge current, while at the high power or high discharge current, the rate of an increase in the plasma density depended on the gas pressures. A transition of the discharge resistance was also found when the mode transition of the power dissipation occurred. These changes in the electrical characteristics and the plasma parameters were mainly caused by the power dissipation mode transition from the plasma bulk to the sheath in the capacitive discharge with the asymmetric electrode, which has extremely high self-bias voltages. - Highlights: • Mode transition of the power dissipation in an asymmetrical capacitive discharge • Evolution of the discharge power, electrode voltage, and discharge impedance • Electron temperature and plasma density on the power dissipation mode transition

  2. Ohmic discharges in Tore Supra - Marfes and detached plasmas

    International Nuclear Information System (INIS)

    Vallet, J.C.

    1990-01-01

    The Tore Supra plasma characteristics are given. The observed discharges are either leaning on the graphite inner first wall or limited by movable pump limiters located outboard and at the bottom of the vacuum chamber. The particular plasma conditions which lead to marfes and detached plasmas in ohmically heated He and D2 discharges limited by the inner wall are investigated. The results show that the ratio of radiated power to ohmic power increase linearly with M.g. As M.g rises, attached plasma, marfe and detached plasma are sequentially observed. Detached plasma with an effective radius as small as. 7 times the limiter radius was observed on Tore Supra

  3. Styrene and methyl methacrylate copolymer synthesized by RF inductively coupled plasma

    Energy Technology Data Exchange (ETDEWEB)

    Li, Z; Gillon, X; Diallo, M; Houssiau, L; Pireaux, J-J, E-mail: zhiling.li@fundp.ac.be [University of Namur (FUNDP) Research Centre in Physics of Matter and Radiation (PMR), 61, Rue de Bruxelles, 5000 Namur (Belgium)

    2011-01-01

    A series of random copolymers of styrene and methyl methacrylate was prepared on a silicon substrate by RF pulsed inductively coupled plasma. The plasma gas phase was investigated by optical emission spectroscopy (OES). The physico-chemical characteristics of the deposited copolymer films were analyzed by several surface techniques: X-ray photoelectron spectroscopy (XPS), Fourier-Transform infrared absorption (FT-IR), Time-of-flight secondary ion mass spectrometry (ToF-SIMS), etc. OES of the plasma and FT-IR spectra of the films are predictive: plasma emitting a higher relative benzyl radical signal results in the deposition of a more aromatic plasma polymer. The functional thin films can be deposited by selection of the co-monomers.

  4. Influence of DC arc jets on flow fields analyzed by an integrated numerical model for a DC-RF hybrid plasma

    International Nuclear Information System (INIS)

    Seo, Jun Ho; Park, Jin Myung; Hong, Sang Hee

    2008-01-01

    The influence of DC arc jets on the flow fields in a hybrid plasma torch is numerically analyzed by an integrated direct current-radio frequency (DC-RF) plasma model based on magneto-hydrodynamic formulations. The calculated results reveal that the increase in DC arc gas flow rate raises the axial flow velocity along the central column of the DC-RF hybrid plasma together with the enhanced backflow streams in the peripheral wall region. The temperature profiles on the torch exit plane are little affected due to the reheating process of the central column by the combined RF plasma. Accordingly, the exit enthalpy emitted from the DC-RF hybrid torch can be concentrated to the central column of the plasma and controlled by adjusting the DC arc gas flow rate. The swirl in the sheath gas flow turns out to have the opposite effect on the DC arc gas flow rate. The swirling motion of the sheath gas can reduce the back flows near the induction tube wall as well as the axial velocities in the central column of the plasma. Accordingly, the swirl in the sheath gas flow can be used for the functional operation of the DC-RF hybrid plasma along with the DC arc gas flow rate to suppress the back flows at the wall region and to reduce the excessive interactions between the DC arc jet and the ambient RF plasmas. The effects of DC input current on the flow fields of hybrid plasma are similar to those of the DC arc gas flow rate, but the axial velocities for the higher current relatively quickly decay along the centerline. This is in contrast to the increase in the axial velocity remaining in proportion to the increase in the DC arc gas flow rate all the way up to the exit of the DC-RF hybrid plasma. Accordingly, the present integrated numerical analysis suggests that the hybrid plasma field profiles and the entrainment of ambient air from the torch exit are controllable by adjusting the DC arc gas flow rate, the DC input current and swirl in the sheath gas flow taking advantage of

  5. High-frequency underwater plasma discharge application in antibacterial activity

    International Nuclear Information System (INIS)

    Ahmed, M. W.; Choi, S.; Lyakhov, K.; Shaislamov, U.; Mongre, R. K.; Jeong, D. K.; Suresh, R.; Lee, H. J.

    2017-01-01

    Plasma discharge is a novel disinfection and effectual inactivation approach to treat microorganisms in aqueous systems. Inactivation of Gram-negative Escherichia coli (E. coli) by generating high-frequency, high-voltage, oxygen (O_2) injected and hydrogen peroxide (H_2O_2) added discharge in water was achieved. The effect of H_2O_2 dose and oxygen injection rate on electrical characteristics of discharge and E. coli disinfection has been reported. Microbial log reduction dependent on H_2O_2 addition with O_2 injection was observed. The time variation of the inactivation efficiency quantified by the log reduction of the initial E. coli population on the basis of optical density measurement was reported. The analysis of emission spectrum recorded after discharge occurrence illustrated the formation of oxidant species (OH"•, H, and O). Interestingly, the results demonstrated that O_2 injected and H_2O_2 added, underwater plasma discharge had fabulous impact on the E. coli sterilization. The oxygen injection notably reduced the voltage needed for generating breakdown in flowing water and escalated the power of discharge pulses. No impact of hydrogen peroxide addition on breakdown voltage was observed. A significant role of oxidant species in bacterial inactivation also has been identified. Furthermore the E. coli survivability in plasma treated water with oxygen injection and hydrogen peroxide addition drastically reduced to zero. The time course study also showed that the retardant effect on E. coli colony multiplication in plasma treated water was favorable, observed after long time. High-frequency underwater plasma discharge based biological applications is technically relevant and would act as baseline data for the development of novel antibacterial processing strategies.

  6. Multiband carbon monoxide laser (2.5 -- 4.0 and 5.0 -- 6.5 micron) pumped by capacitive slab RF discharge

    Science.gov (United States)

    Ionin, Andrey; Kozlov, Andrey; Seleznev, Leonid; Sinitsyn, Dmitry

    2008-10-01

    Overtone lasing and fundamental band tuning was for the first time obtained in a carbon monoxide laser excited by repetitively pulsed capacitive slab RF discharge (81.36 MHz). RF discharge pulse repetition rate was 100--500 Hz. The active volume was 3x30x250 cubic mm. Laser electrodes were cooled down to 120 K. Gas mixture CO:air:He at gas pressure 15 Torr was used. The optical scheme ``frequency selective master oscillator - laser amplifier'' was applied for getting fundamental band tuning. Single line lasing with average power up to several tens of mW was observed on about 100 rotational-vibrational transitions of CO molecule within the spectral range 5.0--6.5 micron. Multiline overtone lasing was observed on about 80 spectral lines within the spectral range 2.5-4.0 micron, with maximum single line average output power 12 mW. The total output power of the slab overtone CO laser came up to 0.35 W, with laser efficiency 0.5 percent. The results of parametric studies of capacitive slab RF discharge in carbon monoxide mixtures, and overtone and fundamental band CO laser characteristics are discussed.

  7. Solid density, low temperature plasma formation in a capillary discharge

    International Nuclear Information System (INIS)

    Kania, D.R.; Jones, L.A.; Maestas, M.D.; Shepherd, R.L.

    1987-01-01

    This work discusses the ability of the authors to produce solid density, low temperature plasmas in polyurethane capillary discharges. The initial capillary diameter is 20 μm. The plasma is produced by discharging a one Ohm parallel plate waterline and Marx generator system through the capillary. A peak current of 340 kA in 300 ns heats the inner wall of the capillary, and the plasma expands into the surrounding material. The authors studied the evolution of the discharge using current and voltage probes, axial and radial streak photography, axial x-ray diode array and schlieren photography, and have estimated the peak temperature of the discharge to be approximately 10 eV and the density to be near 10/sup 23/cm/sup -3/. This indicates that the plasma may approach the strongly coupled regime. They discuss their interpretation of the data and compare their results with theoretical models of the plasma dynamics

  8. RF-heating of plasma in the frequency domain of the ion cyclotron harmonics

    International Nuclear Information System (INIS)

    Hahnekamp, H.G.; Stampa, A.; Tuczek, H.; Laeuter, R.; Wulf, H.O.

    1976-01-01

    Experiments on rf-heating of plasmas in the frequency domain of the ion cyclotron harmonics are reported. The rf-power is coupled to the magneto-acoustic wave for frequencies between ωsub(ci) and 5ωsub(ci). The measurements indicate that the damping of the pump wave is mainly due to the excitation of turbulence, whereas direct resonance at 2ωsub(ci) seems to be of minor importance

  9. Improvement of ozone yield by a multi-discharge type ozonizer using superposition of silent discharge plasma

    International Nuclear Information System (INIS)

    Song, Hyun-Jig; Chun, Byung-Joon; Lee, Kwang-Sik

    2004-01-01

    In order to improve ozone generation, we experimentally investigated the silent discharge plasma and ozone generation characteristics of a multi-discharge type ozonizer. Ozone in a multi-discharge type ozonizer is generated by superposition of a silent discharge plasma, which is simultaneously generated in separated discharge spaces. A multi-discharge type ozonizer is composed of three different kinds of superposed silent discharge type ozonizers, depending on the method of applying power to each electrode. We observed that the discharge period of the current pulse for a multi discharge type ozonizer can be longer than that of silent discharge type ozonizer with two electrodes and one gap. Hence, ozone generation is improved up to 17185 ppm and 783 g/kwh in the case of the superposed silent discharge type ozonizer for which an AC high voltages with a 180 .deg. phase difference were applied to the internal electrode and the external electrode, respectively, with the central electrode being grounded.

  10. Energy coupling to the plasma in repetitive nanosecond pulse discharges

    International Nuclear Information System (INIS)

    Adamovich, Igor V.; Nishihara, Munetake; Choi, Inchul; Uddi, Mruthunjaya; Lempert, Walter R.

    2009-01-01

    A new analytic quasi-one-dimensional model of energy coupling to nanosecond pulse discharge plasmas in plane-to-plane geometry has been developed. The use of a one-dimensional approach is based on images of repetitively pulsed nanosecond discharge plasmas in dry air demonstrating that the plasma remains diffuse and uniform on a nanosecond time scale over a wide range of pressures. The model provides analytic expressions for the time-dependent electric field and electron density in the plasma, electric field in the sheath, sheath boundary location, and coupled pulse energy. The analytic model predictions are in very good agreement with numerical calculations. The model demonstrates that (i) the energy coupled to the plasma during an individual nanosecond discharge pulse is controlled primarily by the capacitance of the dielectric layers and by the breakdown voltage and (ii) the pulse energy coupled to the plasma during a burst of nanosecond pulses decreases as a function of the pulse number in the burst. This occurs primarily because of plasma temperature rise and resultant reduction in breakdown voltage, such that the coupled pulse energy varies approximately proportionally to the number density. Analytic expression for coupled pulse energy scaling has been incorporated into the air plasma chemistry model, validated previously by comparing with atomic oxygen number density measurements in nanosecond pulse discharges. The results of kinetic modeling using the modified air plasma chemistry model are compared with time-resolved temperature measurements in a repetitively pulsed nanosecond discharge in air, by emission spectroscopy, and purely rotational coherent anti-Stokes Raman spectroscopy showing good agreement.

  11. Development of localized arc filament RF plasma actuators for high-speed and high Reynolds number flow control

    International Nuclear Information System (INIS)

    Kim, J.-H.; Nishihara, M.; Adamovich, I.V.; Samimy, M.; Gorbatov, S.V.; Pliavaka, F.V.

    2010-01-01

    Recently developed localized arc filament plasma actuators (LAFPAs) have shown tremendous control authority in high-speed and high Reynolds number flow for mixing enhancement and noise mitigation. Previously, these actuators were powered by a high-voltage pulsed DC plasma generator with low energy coupling efficiency of 5-10%. In the present work, a new custom-designed 8-channel pulsed radio frequency (RF) plasma generator has been developed to power up to 8 plasma actuators operated over a wide range of forcing frequencies (up to 50 kHz) and duty cycles (1-50%), and at high energy coupling efficiency (up to 80-85%). This reduces input electrical power requirements by approximately an order of magnitude, down to 12 W per actuator operating at 10% duty cycle. The new pulsed RF plasma generator is scalable to a system with a large number of channels. Performance of pulsed RF plasma actuators used for flow control was studied in a Mach 0.9 circular jet with a Reynolds number of about 623,000 and compared with that of pulsed DC actuators. Eight actuators were distributed uniformly on the perimeter of a 2.54-cm diameter circular nozzle extension. Both types of actuators coupled approximately the same amount of power to the flow, but with drastically different electrical inputs to the power supplies. Particle image velocimetry measurements showed that jet centerline Mach number decay produced by DC and RF actuators operating at the same forcing frequencies and duty cycles is very similar. At a forcing Strouhal number near 0.3, close to the jet column instability frequency, well-organized periodic structures, with similar patterns and dimensions, were generated in the jets forced by both DC and RF actuators. Far-field acoustic measurements demonstrated similar trends in the overall sound pressure level (OASPL) change produced by both types of actuators, resulting in OASPL reduction up to 1.2-1.5 dB in both cases. We conclude that pulsed RF actuators demonstrate flow

  12. Photoluminescence from PP-HMDSO thin films deposited using a remote plasma of 13.56 MHz hollow cathode discharge

    International Nuclear Information System (INIS)

    Naddaf, M; Saloum, S; Hamadeh, H

    2007-01-01

    Room temperature photoluminescence (PL) from plasma-polymerized hexamethyldisiloxane (PP-HMDSO) thin films deposited on silicon wafers has been investigated as a function of both the applied RF power and the monomer flow rate. Films were deposited in a low pressure-low temperature remote plasma ignited in a 13.56 MHz hollow cathode discharge reactor, using pure HMDSO as a monomer and Ar as a feed gas. The substrate temperature during the deposition was as low as 40 deg. C and the total pressure was about 0.03 mbar. Optical emission spectroscopy (OES) has been used as in situ tool for monitoring the different chemical species present in the plasma during deposition processes. The deposited PP-HMDSO films showed a strong, broad 'green/yellow' PL band. The RF power and the flow rate of the HMDSO monomer are found to have a significant impact on the PL intensity of the deposited film. The changes in the chemical bonding of the film as a function of deposition parameters have been investigated by using the Fourier transform infrared (FTIR) spectroscopic analysis and are related to PL and OES results. The 'green/yellow' PL band is ascribed to chemical groups and bonds of silicon, hydrogen and/or oxygen constituting the films, in particular, SiH, SiO bonds and silanol Si-O-H groups

  13. Photoluminescence from PP-HMDSO thin films deposited using a remote plasma of 13.56 MHz hollow cathode discharge

    Science.gov (United States)

    Naddaf, M.; Saloum, S.; Hamadeh, H.

    2007-07-01

    Room temperature photoluminescence (PL) from plasma-polymerized hexamethyldisiloxane (PP-HMDSO) thin films deposited on silicon wafers has been investigated as a function of both the applied RF power and the monomer flow rate. Films were deposited in a low pressure-low temperature remote plasma ignited in a 13.56 MHz hollow cathode discharge reactor, using pure HMDSO as a monomer and Ar as a feed gas. The substrate temperature during the deposition was as low as 40 °C and the total pressure was about 0.03 mbar. Optical emission spectroscopy (OES) has been used as in situ tool for monitoring the different chemical species present in the plasma during deposition processes. The deposited PP-HMDSO films showed a strong, broad 'green/yellow' PL band. The RF power and the flow rate of the HMDSO monomer are found to have a significant impact on the PL intensity of the deposited film. The changes in the chemical bonding of the film as a function of deposition parameters have been investigated by using the Fourier transform infrared (FTIR) spectroscopic analysis and are related to PL and OES results. The 'green/yellow' PL band is ascribed to chemical groups and bonds of silicon, hydrogen and/or oxygen constituting the films, in particular, SiH, SiO bonds and silanol Si-O-H groups.

  14. Photoluminescence from PP-HMDSO thin films deposited using a remote plasma of 13.56 MHz hollow cathode discharge

    Energy Technology Data Exchange (ETDEWEB)

    Naddaf, M; Saloum, S; Hamadeh, H [Department of Physics, Atomic Energy Commission of Syria (AECS), PO Box 6091, Damascus (Syrian Arab Republic)

    2007-07-07

    Room temperature photoluminescence (PL) from plasma-polymerized hexamethyldisiloxane (PP-HMDSO) thin films deposited on silicon wafers has been investigated as a function of both the applied RF power and the monomer flow rate. Films were deposited in a low pressure-low temperature remote plasma ignited in a 13.56 MHz hollow cathode discharge reactor, using pure HMDSO as a monomer and Ar as a feed gas. The substrate temperature during the deposition was as low as 40 deg. C and the total pressure was about 0.03 mbar. Optical emission spectroscopy (OES) has been used as in situ tool for monitoring the different chemical species present in the plasma during deposition processes. The deposited PP-HMDSO films showed a strong, broad 'green/yellow' PL band. The RF power and the flow rate of the HMDSO monomer are found to have a significant impact on the PL intensity of the deposited film. The changes in the chemical bonding of the film as a function of deposition parameters have been investigated by using the Fourier transform infrared (FTIR) spectroscopic analysis and are related to PL and OES results. The 'green/yellow' PL band is ascribed to chemical groups and bonds of silicon, hydrogen and/or oxygen constituting the films, in particular, SiH, SiO bonds and silanol Si-O-H groups.

  15. Photoluminescence from PP-HMDSO thin films deposited using a remote plasma of 13.56 MHz hollow cathode discharge

    International Nuclear Information System (INIS)

    Naddaf, M.; Saloum, S.; Hamadeh, H.

    2008-01-01

    Room temperature photoluminescence (PL) from plasma-polymerized hexamethyldisiloxane (PP-HMDSO) thin films deposited on silicon wafers has been investigated as a function of both the applied RF power and the monomer flow rate. Films were deposited in a low pressure-low temperature remote plasma ignited in a 13.56 MHz hollow cathode discharge reactor, using pure HMDSO as a monomer and Ar as a feed gas. The substrate temperature during the deposition was as low as 40 deg. C and the total pressure was about 0.03 mbar. Optical emission spectroscopy (OES) has been used as in situ tool for monitoring the different chemical species present in the plasma during deposition processes. The deposited PP-HMDSO films showed a strong, broad 'green/yellow' PL band. The RF power and the flow rate of the HMDSO monomer are found to have a significant impact on the PL intensity of the deposited film. The changes in the chemical bonding of the film as a function of deposition parameters have been investigated by using the Fourier transform infrared (FTIR) spectroscopic analysis and are related to PL and OES results. The 'green/yellow' PL band is ascribed to chemical groups and bonds of silicon, hydrogen and/or oxygen constituting the films, in particular, SiH, SiO bonds and silanol Si-O-H groups. (Authors)

  16. Tonks-Langmuir problem for a bi-Maxwellian plasma

    International Nuclear Information System (INIS)

    Godyak, V.A.; Meytlis, V.P.; Strauss, H.R.

    1995-01-01

    An analytical solution of the Tonks-Langmuir (T-L) problem with a bi-Maxwellian electron energy distribution function (EEDF) is obtained for a plasma slab. The solution shows that the ambipolar potential, the plasma density distribution, and the ion flux to the wall are mainly governed by the cold electrons, while the ionization rate and voltage drop across the wall sheath are governed by the hot electrons. The ionization rate by direct electron impact is found to be spatially rather uniform, contrary to the T-L solution where it is proportional to the plasma density distribution. The temperature of hot electrons defined by the ionization balance is found to be close to that of the T-L solution for a mono-Maxwellian EEDF, and is in reasonable agreement with experiments carried out in a low pressure capacitance RF discharge. The energy balance for cold electrons in this discharge shows that their heating by hot electrons via Coulomb interaction is equalized by the cold electrons' escape to the RF electrodes during collapse of the RF sheath

  17. Recent development on RF-driven multicusp H- ion sources

    International Nuclear Information System (INIS)

    Leung, K.N.; De Vries, G.J.; Kunkel, W.B.; Perkins, L.T.; Pickard, D.S.; Saadatmand, K.; Wengrow, A.B.; Williams, M.D.

    1996-06-01

    The radio-frequency (rf) driven multicusp source was originally developed for use in the Superconducting Super Collider injector. The source routinely provided 35 keV, 30 mA of beam at 0.1% duty factor. By using a new cesium dispensing system, beam current in excess of 100 mA and e/H - ∼1 have been observed. For pulse mode operation, the rf discharge can be started by means of a xenon flash lamp. Extracted electrons in the beam can be efficiently removed by employing a permanent magnet insert structure. Chopping of the H - beam can be accomplished by applying a pulsed positive voltage on the plasma electrode

  18. A PIC-MCC code RFdinity1d for simulation of discharge initiation by ICRF antenna

    Science.gov (United States)

    Tripský, M.; Wauters, T.; Lyssoivan, A.; Bobkov, V.; Schneider, P. A.; Stepanov, I.; Douai, D.; Van Eester, D.; Noterdaeme, J.-M.; Van Schoor, M.; ASDEX Upgrade Team; EUROfusion MST1 Team

    2017-12-01

    Discharges produced and sustained by ion cyclotron range of frequency (ICRF) waves in absence of plasma current will be used on ITER for (ion cyclotron-) wall conditioning (ICWC, Te = 3{-}5 eV, ne 18 m-3 ). In this paper, we present the 1D particle-in-cell Monte Carlo collision (PIC-MCC) RFdinity1d for the study the breakdown phase of ICRF discharges, and its dependency on the RF discharge parameters (i) antenna input power P i , (ii) RF frequency f, (iii) shape of the electric field and (iv) the neutral gas pressure pH_2 . The code traces the motion of both electrons and ions in a narrow bundle of magnetic field lines close to the antenna straps. The charged particles are accelerated in the parallel direction with respect to the magnetic field B T by two electric fields: (i) the vacuum RF field of the ICRF antenna E_z^RF and (ii) the electrostatic field E_zP determined by the solution of Poisson’s equation. The electron density evolution in simulations follows exponential increase, {\\dot{n_e} ∼ ν_ion t } . The ionization rate varies with increasing electron density as different mechanisms become important. The charged particles are affected solely by the antenna RF field E_z^RF at low electron density ({ne < 1011} m-3 , {≤ft \\vert E_z^RF \\right \\vert \\gg ≤ft \\vert E_zP \\right \\vert } ). At higher densities, when the electrostatic field E_zP is comparable to the antenna RF field E_z^RF , the ionization frequency reaches the maximum. Plasma oscillations propagating toroidally away from the antenna are observed. The simulated energy distributions of ions and electrons at {ne ∼ 1015} m-3 correspond a power-law Kappa energy distribution. This energy distribution was also observed in NPA measurements at ASDEX Upgrade in ICWC experiments.

  19. Parallel 3-D numerical simulation of dielectric barrier discharge plasma actuators

    Science.gov (United States)

    Houba, Tomas

    Dielectric barrier discharge plasma actuators have shown promise in a range of applications including flow control, sterilization and ozone generation. Developing numerical models of plasma actuators is of great importance, because a high-fidelity parallel numerical model allows new design configurations to be tested rapidly. Additionally, it provides a better understanding of the plasma actuator physics which is useful for further innovation. The physics of plasma actuators is studied numerically. A loosely coupled approach is utilized for the coupling of the plasma to the neutral fluid. The state of the art in numerical plasma modeling is advanced by the development of a parallel, three-dimensional, first-principles model with detailed air chemistry. The model incorporates 7 charged species and 18 reactions, along with a solution of the electron energy equation. To the author's knowledge, a parallel three-dimensional model of a gas discharge with a detailed air chemistry model and the solution of electron energy is unique. Three representative geometries are studied using the gas discharge model. The discharge of gas between two parallel electrodes is used to validate the air chemistry model developed for the gas discharge code. The gas discharge model is then applied to the discharge produced by placing a dc powered wire and grounded plate electrodes in a channel. Finally, a three-dimensional simulation of gas discharge produced by electrodes placed inside a riblet is carried out. The body force calculated with the gas discharge model is loosely coupled with a fluid model to predict the induced flow inside the riblet.

  20. RF start-up and sustainment experiments on the TST-2-K spherical tokamak

    International Nuclear Information System (INIS)

    Ejiri, A.; Takase, Y.; Kasahara, H.; Yamada, T.; Hanada, K.; Sato, K. N.; Zushi, H.; Nakamura, K.; Sakamoto, M.; Idei, H.; Hasegawa, M.; Iyomasa, A.; Imamura, N.; Esaki, K.; Kitaguchi, M.; Sasaki, K.; Hoshika, H.; Mitarai, O.; Nishino, N.

    2006-01-01

    Plasma start-up and sustainment without an inductive field have been studied in the TST-2-K spherical tokamak using high power RF sources (8.2 GHz/up to 170 kW). Steady state discharges with a plasma current of 4 kA were achieved. The line integrated density was about 3 x 10 17 m -2 and the electron temperature was 160 eV. A truncated equilibrium was introduced to reproduce magnetic measurements. It was found that a positive Pfirsch-Schlueter current in the open field line region at the outboard boundary makes a significant contribution to the current. Insensitivity of the current to variations in the vertical field and RF power variation was also found

  1. Gas Temperature Measurement in a Glow Discharge Plasma

    Science.gov (United States)

    Sloneker, Kenneth; Podder, Nirmol; McCurdy, William E.; Shi, Shi

    2009-10-01

    In this study a relatively inexpensive quartz protected thermocouple is used to measure the gas temperature in the positive column of a glow discharge plasma. For simplicity a K-type thermocouple is used to interpret the gas temperature from the sensor voltage at pressures from 0.5 Torr to 15 Torr and discharge currents from 5 mA to 120 mA. Gas temperature is investigated as a function of the gas pressure at fixed discharge currents and as a function of discharge current at fixed gas pressures in three different gas species (Ar, N2, and He). An infinite cylinder model is used to compute the average gas temperature of the discharge from joule heating and gas thermal conductivity. The model and measurement data agree within 1% to 10% depending on plasma parameters. Data for all three gases have a similar quasi-linear increasing error as compared to the model.

  2. Characterization of a dielectric barrier plasma gun discharging at atmospheric pressure

    International Nuclear Information System (INIS)

    Zhang Guangqiu; Ge Yuanjing; Zhang Yuefei; Chen Guangliang

    2004-01-01

    The authors develop a plasma gun based on dielectric barrier discharge and working at atmospheric pressure. A theoretical model to predict the gun discharge voltage is built, which is in agreement with the experimental results. After investigating the characterization of discharging gun and utilizing it for polymerization, authors find that the gun can be used as a source to generate a stable uniform plasma for different plasma-processing technologies. (author)

  3. Radio-frequency glow discharge spectrometry: A critical review

    International Nuclear Information System (INIS)

    Winchester, Michael R.; Payling, Richard

    2004-01-01

    This paper presents a critical review of analytical radio frequency glow discharge spectrometry (rf-GDS). The historical foundations of rf-GDS are described, and current knowledge of the fundamental physics of analytical rf glow discharges is discussed. Additionally, instrumentation, methodologies, and applications of rf glow discharge optical emission spectrometry (rf-GDOES) and mass spectrometry (rf-GDMS) are reviewed. Although other rf-GDS techniques have appeared [e.g. rf glow discharge atomic absorption spectrophotometry (rf-GDAAS)], the emphasis is placed upon rf-GDOES and rf-GDMS, because they have received by far the most interest from analytical chemical metrologists. This review also provides explanations of some developments that are needed for further progress in the field of analytical rf-GDS

  4. High-frequency underwater plasma discharge application in antibacterial activity

    Energy Technology Data Exchange (ETDEWEB)

    Ahmed, M. W.; Choi, S.; Lyakhov, K.; Shaislamov, U. [Jeju National University, Department of Nuclear and Energy Engineering (Korea, Republic of); Mongre, R. K.; Jeong, D. K. [Jeju National University, Faculty of Biotechnology (Korea, Republic of); Suresh, R.; Lee, H. J., E-mail: hjlee@jejunu.ac.kr [Jeju National University, Department of Nuclear and Energy Engineering (Korea, Republic of)

    2017-03-15

    Plasma discharge is a novel disinfection and effectual inactivation approach to treat microorganisms in aqueous systems. Inactivation of Gram-negative Escherichia coli (E. coli) by generating high-frequency, high-voltage, oxygen (O{sub 2}) injected and hydrogen peroxide (H{sub 2}O{sub 2}) added discharge in water was achieved. The effect of H{sub 2}O{sub 2} dose and oxygen injection rate on electrical characteristics of discharge and E. coli disinfection has been reported. Microbial log reduction dependent on H{sub 2}O{sub 2} addition with O{sub 2} injection was observed. The time variation of the inactivation efficiency quantified by the log reduction of the initial E. coli population on the basis of optical density measurement was reported. The analysis of emission spectrum recorded after discharge occurrence illustrated the formation of oxidant species (OH{sup •}, H, and O). Interestingly, the results demonstrated that O{sub 2} injected and H{sub 2}O{sub 2} added, underwater plasma discharge had fabulous impact on the E. coli sterilization. The oxygen injection notably reduced the voltage needed for generating breakdown in flowing water and escalated the power of discharge pulses. No impact of hydrogen peroxide addition on breakdown voltage was observed. A significant role of oxidant species in bacterial inactivation also has been identified. Furthermore the E. coli survivability in plasma treated water with oxygen injection and hydrogen peroxide addition drastically reduced to zero. The time course study also showed that the retardant effect on E. coli colony multiplication in plasma treated water was favorable, observed after long time. High-frequency underwater plasma discharge based biological applications is technically relevant and would act as baseline data for the development of novel antibacterial processing strategies.

  5. Gyrokinetic Calculations of Microinstabilities and Transport During RF H-Modes on Alcator C-Mod

    International Nuclear Information System (INIS)

    Redi, M.H.; Fiore, C.; Bonoli, P.; Bourdelle, C.; Budny, R.; Dorland, W.D.; Ernst, D.; Hammett, G.; Mikkelsen, D.; Rice, J.; Wukitch, S.

    2002-01-01

    Physics understanding for the experimental improvement of particle and energy confinement is being advanced through massively parallel calculations of microturbulence for simulated plasma conditions. The ultimate goal, an experimentally validated, global, non-local, fully nonlinear calculation of plasma microturbulence is still not within reach, but extraordinary progress has been achieved in understanding microturbulence, driving forces and the plasma response in recent years. In this paper we discuss gyrokinetic simulations of plasma turbulence being carried out to examine a reproducible, H-mode, RF heated experiment on the Alcator CMOD tokamak3, which exhibits an internal transport barrier (ITB). This off axis RF case represents the early phase of a very interesting dual frequency RF experiment, which shows density control with central RF heating later in the discharge. The ITB exhibits steep, spontaneous density peaking: a reduction in particle transport occurring without a central particle source. Since the central temperature is maintained while the central density is increasing, this also suggests a thermal transport barrier exists. TRANSP analysis shows that ceff drops inside the ITB. Sawtooth heat pulse analysis also shows a localized thermal transport barrier. For this ICRF EDA H-mode, the minority resonance is at r/a * 0.5 on the high field side. There is a normal shear profile, with q monotonic

  6. Rydberg gas theory of a glow discharge plasma: I. Application to the electrical behaviour of a fast flowing glow discharge plasma.

    Science.gov (United States)

    Mason, Rod S; Mitchell, David J; Dickinson, Paul M

    2010-04-21

    Current-voltage (I-V) curves have been measured, independent of the main discharge, for electricity passing through the steady state fast flowing 'afterglow' plasma of a low power dc glow discharge in Ar. Voltage profiles along the axial line of conduction have been mapped using fixed probes and potentiometry, and the mass spectra of cations emerging from the downstream sampling Cone, also acting as a probe anode, were recorded simultaneously. Floating double probe experiments were also carried out. The electrical behavior is consistent with the well established I-V characteristics of such discharges, but does not comply with classical plasma theory predictions. The plasma decays along the line of conduction, with a lifetime of approximately 1 ms, despite carrying a steady state current, and its potential is below that of the large surface area anode voltage; a situation which cannot exist in the presence of a conventional free ion-electron plasma, unless the electron temperature is super cold. Currents, large by comparison with the main discharge current, and independent of it, are induced to flow through the downstream plasma, from the Anode (acting as a cathode) to the anodic ion exit Cone, induced by electron impact ionisation at the anode, but without necessarily increasing the plasma density. It appears to be conducted by direct charge transfer between a part of the anode surface (acting as cathode to the auxiliary circuit) and the plasma, without secondary electron emission or heating, which suggests the direct involvement of Rydberg atom intermediates. The reaction energy defect (= the work function of the electrode surface) fits with the plasma potential threshold observed for the cathodic reaction to occur. A true free ion-electron plasma is readily detected by the observation of cations at the anode surface, when induced at the downstream anode, at high bias voltages, by the electron impact ionisation in the boundary region. In contrast to the classical

  7. Decomposition of SF6-R134a effluents by RF plasma

    International Nuclear Information System (INIS)

    Joshi, Avinash V.

    2012-01-01

    The efficiency of recovery achieved by open or closed loop extraction of RPC exhaust gases is in the range of 90-95% under optimum conditions. For a large detector setup operating on one volume change per day basis, a 5% loss amounts to discharging 50 kg of R134a and 0.5 kg of SF 6 into atmosphere every day. The emissions are equivalent to create nearly 50 000 m 3 of carbon dioxide daily. The gas emissions need to be completely converted to safer compounds. The gases such as R134a and SF 6 are stable compounds. In order to decompose these, the mixture is first activated by adding of 50% oxygen and 2% argon and under typical RF plasma conditions of 13.56 MHz, 1 Torr pressure and 0.2 W/cm 2 power density. The chemical reaction takes place on the surface of a silicon electrode. The product of the reaction is mainly SiF 4 (gas), which is further hydrolyzed to form HF solution and silicon hydroxide sludge. More than 90% of the effluent gas mixture can be effectively removed by this method.

  8. Residual dust charges in discharge afterglow

    International Nuclear Information System (INIS)

    Coueedel, L.; Mikikian, M.; Boufendi, L.; Samarian, A. A.

    2006-01-01

    An on-ground measurement of dust-particle residual charges in the afterglow of a dusty plasma was performed in a rf discharge. An upward thermophoretic force was used to balance the gravitational force. It was found that positively charged, negatively charged, and neutral dust particles coexisted for more than 1 min after the discharge was switched off. The mean residual charge for 200-nm-radius particles was measured. The dust particle mean charge is about -5e at a pressure of 1.2 mbar and about -3e at a pressure of 0.4 mbar

  9. Determination of electron density and temperature in a capacitively coupled RF discharge in neon by OES complemented with a CR model

    Energy Technology Data Exchange (ETDEWEB)

    Navratil, Z; Dvorak, P; Trunec, D [Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 611 37 Brno (Czech Republic); Brzobohaty, O, E-mail: zdenek@physics.muni.c [Institute of Scientific Instruments of the ASCR, v.v.i., Academy of Sciences of the Czech Republic, Kralovopolska 147, 612 64 Brno (Czech Republic)

    2010-12-22

    A method of determination of electron temperature and electron density in plasmas based on optical emission spectroscopy complemented with collisional-radiative modelling (OES/CRM) was studied in this work. A radiofrequency (13.56 MHz) capacitively coupled discharge in neon at 10 Pa was investigated by intensity calibrated optical emission spectroscopy. The absolute intensities of neon transitions between 3p and 3s states were fitted with a collisional-radiative (CR) model in order to determine the electron temperature and electron density. Measuring techniques such as imaging with an ICCD camera were adopted for supplementary diagnostics. The obtained results were compared with the results of compensated Langmuir probe measurement and one-dimensional particle-in-cell/Monte Carlo (PIC/MC) simulation. The results of OES/CRM and PIC/MC method were in close agreement in the case of electron temperature in the vicinity of a driven electrode. The determined value of electron temperature was about 8 eV. In bulk plasma, the measured spectra were not satisfactorily fitted. In the case of electron density only relative agreement was obtained between OES/CRM and Langmuir probe measurement; the absolute values differed by a factor of 5. The axial dependence of electron density calculated by PIC/MC was distinct from them, reaching the maximum values between the results of the other two methods. The investigation of power dependence of plasma parameters close to the driven electrode showed a decrease in electron temperature and an increase in electron density together with increasing incoming RF power. The calculated spectra fitted very well the measured spectra in this discharge region.

  10. RF generator interlock by plasma grid bias current - An alternate to Hα interlock

    Science.gov (United States)

    Bandyopadhyay, M.; Gahlaut, A.; Yadav, R. K.; Pandya, K.; Tyagi, H.; Vupugalla, M.; Bhuyan, M.; Bhagora, J.; Chakraborty, A.

    2017-08-01

    ROBIN is inductively coupled plasma (ICP) based negative hydrogen ion source, operated with a 100kW, 1MHz Tetrode based RF generator (RFG). Inductive plasma ignition by the RFG in ROBIN is associated with electron seeding by a hot filament and a gas puff. RFG is triggered by the control system to deliver power just at the peak pressure of the gas puff. Once plasma is ignited due to proper impedance matching, a bright light, dominated by Hα (˜656nm wavelength) radiation is available inside RF driver which is used as a feedback signal to the RFG to continue its operation. If impedance matching is not correct, plasma is not produced due to lack of power coupling and bright light is not available. During such condition, reflected RF power may damage the RFG. Therefore, to protect the RFG, it needs to be switched off automatically within 200ms by the control system in such cases. This plasma light based RFG interlock is adopted from BATMAN ion source. However, in case of vacuum immersed RF ion source in reactor grade NBI system, such plasma light based interlock may not be feasible due to lack of adequate optical fiber interfaces. In reactor grade NBI system, neutron and gamma radiations have impact on materials which may lead to frequent maintenance and machine down time. The present demonstration of RFG interlock by Bias Current (BC) in ROBIN testbed gives an alternate option in this regard. In ROBIN, a bias plate (BP) is placed in the plasma chamber near the plasma grid (PG). BP is electrically connected to the plasma chamber wall of the ion source and PG is isolated from the wall. A high current ˜85 A direct current (DC) power supply of voltage in the range of 0 - 33V is connected between the PG and the BP in such a way that PG can be biased positively with respect to the BP or plasma chamber. This arrangement is actually made to absorb electrons and correspondingly reduce co-extracted electron current during beam extraction. However, in case of normal plasma

  11. Contact glow discharge electrolysis: its origin, plasma diagnostics and non-faradaic chemical effects

    International Nuclear Information System (INIS)

    Sen Gupta, Susanta K

    2015-01-01

    Contact glow discharge electrolysis (CGDE) also termed plasma electrolysis is a novel electrolysis where a stable sheath of light emitting plasma develops around an electrode immersed well inside a relatively high-conductivity liquid electrolyte during normal electrolysis (NE) at several hundred volts. The phenomenon may develop in dc-, pulsed dc-, ac- as well as RF-driven electrolyses. The chemical effects of CGDE are remarkably non-faradaic in respect to the nature of the products as well as their yields. The article traces comprehensively the progress made in studies of CGDE in aqueous and non-aqueous solutions since 1844 and reviews the developments in the understanding of its origin, light emission, plasma state and non-faradaic effects leading to the elucidation of detailed mechanism of the origin of CGDE on the basis of the onset of hydrodynamic instabilities in local vaporization of the solvent near the working electrode during NE, and that of highly non-faradaic effects of CGDE based on a model of two reaction zones located within the electrode plasma and at the plasma–liquid interface producing solvent derived radicals at high local concentrations. Keeping in view the recent surge of interest in varied applications of CGDE, the article is appended with highlights of these applications across synthetic chemistry, waste water treatment, electrosurgical devices, nanoparticle fabrications, surface engineering and micro-machining. (topical review)

  12. Discharge Characteristics of DC Arc Water Plasma for Environmental Applications

    International Nuclear Information System (INIS)

    Choi, Sooseok; Watanabe, Takayuki; Li Tianming

    2012-01-01

    A water plasma was generated by DC arc discharge with a hafnium embedded rod-type cathode and a nozzle-type anode. The discharge characteristics were examined by changing the operation parameter of the arc current. The dynamic behavior of the arc discharge led to significant fluctuations in the arc voltage and its frequency. Analyses of the high speed image and the arc voltage waveform showed that the arc discharge was in the restrike mode and its frequency varied within several tens of kilohertz according to the operating conditions. The larger thermal plasma volume was generated by the higher flow from the forming steam with a higher restrike frequency in the higher arc current conditions. In addition, the characteristics of the water plasma jet were investigated by means of optical emission spectroscopy to identify the abundant radicals required in an efficient waste treatment process. (plasma technology)

  13. Magnetic field effects on electrical parameters of rf excited CO{sub 2} lasers

    Energy Technology Data Exchange (ETDEWEB)

    Tavassoli, S.H. [Laser Research Institute and Physics Department of Shahid Beheshti University, Evin, Tehran (Iran, Islamic Republic of)]. E-mail: h-tavassoli@cc.sbu.ac.ir; Latifi, H. [Laser Research Institute and Physics Department of Shahid Beheshti University, Evin, Tehran (Iran, Islamic Republic of)

    2005-02-14

    In the present Letter a rf excited CO{sub 2} laser embedded in an external, constant, and homogeneous magnetic field is considered. The magnetic field effects on some discharge parameters such as V-I characteristics, impedance of sheaths and positive column of plasma, intensity of visible emission from plasma and thickness of positive column are investigated. There is an increase in thickness of positive column and output power in presence of magnetic field. Magnetic field leads to an increase in the discharge voltage and impedance for lower current densities and a decrease for higher ones. There is a current density in which the magnetic field has no effects on discharge voltage and impedance. There are two peaks on intensity of visible emission from the discharge which at higher magnetic field are pushed out toward the electrodes.

  14. Mode transition of a Hall thruster discharge plasma

    International Nuclear Information System (INIS)

    Hara, Kentaro; Sekerak, Michael J.; Boyd, Iain D.; Gallimore, Alec D.

    2014-01-01

    A Hall thruster is a cross-field plasma device used for spacecraft propulsion. An important unresolved issue in the development of Hall thrusters concerns the effect of discharge oscillations in the range of 10–30 kHz on their performance. The use of a high speed Langmuir probe system and ultra-fast imaging of the discharge plasma of a Hall thruster suggests that the discharge oscillation mode, often called the breathing mode, is strongly correlated to an axial global ionization mode. Stabilization of the global oscillation mode is achieved as the magnetic field is increased and azimuthally rotating spokes are observed. A hybrid-direct kinetic simulation that takes into account the transport of electronically excited atoms is used to model the discharge plasma of a Hall thruster. The predicted mode transition agrees with experiments in terms of the mean discharge current, the amplitude of discharge current oscillation, and the breathing mode frequency. It is observed that the stabilization of the global oscillation mode is associated with reduced electron transport that suppresses the ionization process inside the channel. As the Joule heating balances the other loss terms including the effects of wall loss and inelastic collisions, the ionization oscillation is damped, and the discharge oscillation stabilizes. A wide range of the stable operation is supported by the formation of a space charge saturated sheath that stabilizes the electron axial drift and balances the Joule heating as the magnetic field increases. Finally, it is indicated from the numerical results that there is a strong correlation between the emitted light intensity and the discharge current.

  15. RF plasma source for heavy ion beam charge neutralization

    International Nuclear Information System (INIS)

    Efthimion, Philip C.; Gilson, Erik; Grisham, Larry; Davidson, Ronald C.; Yu, Simon S.; Logan, B. Grant

    2003-01-01

    Highly ionized plasmas are being used as a medium for charge neutralizing heavy ion beams in order to focus the ion beam to a small spot size. A radio frequency (RF) plasma source has been built at the Princeton Plasma Physics Laboratory (PPPL) in support of the joint Neutralized Transport Experiment (NTX) at the Lawrence Berkeley National Laboratory (LBNL) to study ion beam neutralization with plasma. The goal is to operate the source at pressures ∼ 10 -5 Torr at full ionization. The initial operation of the source has been at pressures of 10 -4 -10 -1 Torr and electron densities in the range of 10 8 -10 11 cm -3 . Recently, pulsed operation of the source has enabled operation at pressures in the 10 -6 Torr range with densities of 10 11 cm -3 . Near 100% ionization has been achieved. The source has been integrated with the NTX facility and experiments have begun

  16. Application of epifluorescence scanning for monitoring the efficacy of protein removal by RF gas-plasma decontamination

    Energy Technology Data Exchange (ETDEWEB)

    Baxter, Helen C; Richardson, Patricia R; Campbell, Gaynor A; Jones, Anita C; Baxter, Robert L [School of Chemistry, Joseph Black Chemistry Building, University of Edinburgh, West Mains Road, Edinburgh EH9 3JJ (United Kingdom); Kovalev, Valeri I; Maier, Robert; Barton, James S [School of Engineering and Physical Science, Heriot-Watt University, Edinburgh EH14 4AS (United Kingdom); DeLarge, Greg [Plasma Etch Inc, 3522 Arrowhead Drive, Carson City, NV 89706 (United States); Casey, Mark [Sterile Services Department, Royal Infirmary of Edinburgh, Edinburgh EH16 4AS (United Kingdom)], E-mail: r.baxter@ed.ac.uk

    2009-11-15

    The development of methods for measuring the efficiency of gas-plasma decontamination has lagged far behind application. An approach to measuring the efficiency of protein removal from solid surfaces using fluorescein-labelled bovine serum albumin and epifluorescence scanning (EFSCAN) is described. A method for fluorescently labelling proteins, which are adsorbed and denatured on metal surfaces, has been developed. Both approaches have been used to evaluate the efficiency of radio frequency (RF) gas-plasma decontamination protocols. Examples with 'real' surgical instruments demonstrate that an argon-oxygen RF gas-plasma treatment can routinely reduce the protein load by about three orders of magnitude beyond that achieved by current decontamination methods.

  17. Application of epifluorescence scanning for monitoring the efficacy of protein removal by RF gas-plasma decontamination

    International Nuclear Information System (INIS)

    Baxter, Helen C; Richardson, Patricia R; Campbell, Gaynor A; Jones, Anita C; Baxter, Robert L; Kovalev, Valeri I; Maier, Robert; Barton, James S; DeLarge, Greg; Casey, Mark

    2009-01-01

    The development of methods for measuring the efficiency of gas-plasma decontamination has lagged far behind application. An approach to measuring the efficiency of protein removal from solid surfaces using fluorescein-labelled bovine serum albumin and epifluorescence scanning (EFSCAN) is described. A method for fluorescently labelling proteins, which are adsorbed and denatured on metal surfaces, has been developed. Both approaches have been used to evaluate the efficiency of radio frequency (RF) gas-plasma decontamination protocols. Examples with 'real' surgical instruments demonstrate that an argon-oxygen RF gas-plasma treatment can routinely reduce the protein load by about three orders of magnitude beyond that achieved by current decontamination methods.

  18. Improved planar radio frequency inductively coupled plasma configuration in plasma immersion ion implantation

    International Nuclear Information System (INIS)

    Tang, D.L.; Fu, R.K.Y.; Tian, X.B.; Chu, P.K.

    2003-01-01

    Plasmas with higher density and better uniformity are produced using an improved planar radio frequency (rf) inductively coupled plasma configuration in plasma immersion ion implantation (PIII). An axial magnetic field is produced by external electromagnetic coils outside the discharge chamber. The rf power can be effectively absorbed by the plasma in the vicinity of the electron gyrofrequency due to the enhanced resonant absorption of electromagnetic waves in the whistler wave range, which can propagate nearly along the magnetic field lines thus greatly increases the plasma density. The plasma is confined by a longitudinal multipolar cusp magnetic field made of permanent magnets outside the process chamber. It can improve the plasma uniformity without significantly affecting the ion density. The plasma density can be increased from 3x10 9 to 1x10 10 cm -3 employing an axial magnetic field of several Gauss at 1000 W rf power and 5x10 -4 Torr gas pressure. The nonuniformity of the plasma density is less than 10% and can be achieved in a process chamber with a diameter of 600 mm. Since the plasma generation and process chambers are separate, plasma extinction due to the plasma sheath touching the chamber wall in high-energy PIII can be avoided. Hence, low-pressure, high-energy, and high-uniformity ion implantation can be accomplished using this setup

  19. Bulk plasma properties in the pulsed glow discharge

    International Nuclear Information System (INIS)

    Jackson, Glen P.; King, Fred L.

    2003-01-01

    This work focuses on the spatial and temporal characteristics of a glow discharge plasma operated with power pulses of 5 ms in duration at 25% duty cycle. Interpretation of emission data provides insight into the nature of the plasma at each instant of a typical pulse cycle and at each position in space. Because the bulk plasma properties affect the distribution of excited energy levels of the sputtered atoms, an improved understanding of the plasma affords the ability to select conditions that enhance analytically important emission lines. Optical emission spectroscopy was used to determine the relative populations of excited states for atoms and ions during the initial breakdown, the steady state and the recombining periods of the discharge pulse cycle. The plasma is highly ionizing in nature at the time of breakdown--with lower excited states being overpopulated--before reaching the steady state, or plateau, period, also ionizing in nature. These behaviors arise from a loss of charged particles and photons to the surroundings that shifts the plasma away from Saha and Boltzmann balances during these periods. The post-pulse period typically displays recombining behavior, characterized by population inversion for selected species--except for regions close to the cathode, where electrons and ions are lost by diffusion and are not available for recombination. The sputtered analyte atom emissions closely mimic those of the plasma bath gas, except that their emissions persevere for longer in the recombining after-peak period than do the discharge gas species

  20. Diagnostics of an rf induction plasma torch with the aid of a magnetic probe

    International Nuclear Information System (INIS)

    Shamim, A.; Wooding, E.R.

    1978-01-01

    Estimates of a plasma temperature, electrical conductivity, and torch efficiency have been made from simple measurements made on the plasma and on the rf supply. Measurements were made with the aid of a simple magnetic probe and a pickup coil. Estimates are also made of the heating-coil constants

  1. Frequency effects in silane plasmas for PECVD

    International Nuclear Information System (INIS)

    Howling, A.A.; Dorier, J.L.; Hollenstein, C.; Finger, F.; Kroll, U.

    1991-09-01

    It is generally recognised that the excitation frequency is an important parameter in rf plasma-assisted deposition. VHF silane plasmas (50-100 MHz) have been shown to produce high quality amorphous silicon films up to 20 A/s, and therefore the aim of this work is to compare the VHF range with the 13.56 MHz industrial frequency in the same reactor. The principal diagnostics used are electrical measurements and a CCD camera for spatially-resolved plasma-induced emission with Abel inversion of the plasma image. We present a comparative study of key discharge parameters such as deposition rates, plasma uniformity, ion impact energy, power transfer efficiency and powder formation for the rf range 13-70 MHz. (author) 5 figs., 19 refs

  2. Simulation of plasma loading of high-pressure RF cavities

    Energy Technology Data Exchange (ETDEWEB)

    Yu, K. [Brookhaven National Lab. (BNL), Upton, NY (United States). Computational Science Initiative; Samulyak, R. [Brookhaven National Lab. (BNL), Upton, NY (United States). Computational Science Initiative; Stony Brook Univ., NY (United States). Dept. of Applied Mathematics and Statistics; Yonehara, K. [Fermi National Accelerator Lab. (FNAL), Batavia, IL (United States); Freemire, B. [Northern Illinois Univ., DeKalb, IL (United States)

    2018-01-11

    Muon beam-induced plasma loading of radio-frequency (RF) cavities filled with high pressure hydrogen gas with 1% dry air dopant has been studied via numerical simulations. The electromagnetic code SPACE, that resolves relevant atomic physics processes, including ionization by the muon beam, electron attachment to dopant molecules, and electron-ion and ion-ion recombination, has been used. Simulations studies have also been performed in the range of parameters typical for practical muon cooling channels.

  3. Simulation of plasma loading of high-pressure RF cavities

    Science.gov (United States)

    Yu, K.; Samulyak, R.; Yonehara, K.; Freemire, B.

    2018-01-01

    Muon beam-induced plasma loading of radio-frequency (RF) cavities filled with high pressure hydrogen gas with 1% dry air dopant has been studied via numerical simulations. The electromagnetic code SPACE, that resolves relevant atomic physics processes, including ionization by the muon beam, electron attachment to dopant molecules, and electron-ion and ion-ion recombination, has been used. Simulations studies have been performed in the range of parameters typical for practical muon cooling channels.

  4. Direct visual observation of powder dynamics in RF plasma-assisted deposition

    International Nuclear Information System (INIS)

    Howling, A.A.; Hollenstein, C.; Paris, P.J.

    1991-04-01

    Contamination due to particles generated and suspended in silane rf plasmas is investigated. Powder is rendered visible by illumination of the reactor volume. This simple diagnostic for global, spatio-temporal powder dynamics is used to study particle formation, trapping and powder reduction by power modulation. (author) 4 figs., 11 refs

  5. Energy conversion and concentration in a high-current gaseous discharge: Dense plasma spheromak in plasma focus experiments

    International Nuclear Information System (INIS)

    Kukushkin, A.B.; Rantsev-Kartinov, V.A.; Terentiev, A.R.

    1995-01-01

    Experimental results are presented which verify the possibility of the self-generated transformation of the magnetic field in plasma focus discharges to give a closed, spheromak-like magnetic configuration (SLMC). The energy conversion mechanism suggests a possibility of further concentrating the plasma power density by means of natural compressing the SLMC-trapped plasma by the residual magnetic field of the plasma focus discharge

  6. Time and space-correlated plasma potential measurements in the near field of a coaxial Hall plasma discharge

    International Nuclear Information System (INIS)

    Smith, A. W.; Cappelli, M. A.

    2009-01-01

    Space- and time-correlated measurements of floating and plasma potential are made in the near field, external flow cathode region of a coaxial Hall plasma discharge using an emissive probe synchronized to quasicoherent fluctuations in discharge current. The luminous axial feature frequently observed in the near field of operating plasma accelerators is found to be concomitant with a spike in the plasma potential (and electron temperature). The structure of the plasma potential allows for multiple avenues for back-streaming ions to accelerate toward the discharge front pole and may pull some classes of ions toward the central axis. The fluctuations in plasma properties exhibit a complex structure at frequencies on the order of the so-called 'breathing mode' ionization instability often seen in these types of discharges. Most notably, the plasma potential appears to fluctuate in a helical fashion, resembling tilted drift waves rotating about the central axis. A simple analysis of these waves draws attention to the possible role that they may play in driving anomalous cross-field electron transport in the near field region.

  7. Characterization of injected aluminum oxide nanoparticle clouds in an rf discharge

    Science.gov (United States)

    Krüger, Harald; Killer, Carsten; Schütt, Stefan; Melzer, André

    2018-02-01

    An experimental setup to deagglomerate and insert nanoparticles into a radio frequency discharge has been developed to confine defined aluminum oxide nanoparticles in a dusty plasma. For the confined particle clouds we have measured the spatially resolved in situ size and density distributions. Implementing the whole plasma chamber into the sample volume of an FTIR spectrometer the infrared spectrum of the confined aluminum oxide nanoparticles has been obtained. We have investigated the dependency of the absorbance of the nanoparticles in terms of plasma power, pressure and cloud shape. The particles’ infrared phonon resonance has been identified.

  8. Titanium oxidation by rf inductively coupled plasma

    International Nuclear Information System (INIS)

    Valencia-Alvarado, R; López-Callejas, R; Barocio, S R; Mercado-Cabrera, A; Peña-Eguiluz, R; Muñoz-Castro, A E; Rodríguez-Méndez, B G; De la Piedad-Beneitez, A; De la Rosa-Vázquez, J M

    2014-01-01

    The development of titanium dioxide (TiO 2 ) films in the rutile and anatase phases is reported. The films have been obtained from an implantation/diffusion and sputtering process of commercially pure titanium targets, carried out in up to 500 W plasmas. The experimental outcome is of particular interest, in the case of anatase, for atmospheric pollution degradation by photocatalysis and, as to the rutile phase, for the production of biomaterials required by prosthesis and implants. The reactor employed consists in a cylindrical pyrex-like glass vessel inductively coupled to a 13.56 MHz RF source. The process takes place at a 5×10 −2 mbar pressure with the target samples being biased from 0 to -3000 V DC. The anatase phase films were obtained from sputtering the titanium targets over glass and silicon electrically floated substrates placed 2 cm away from the target. The rutile phase was obtained by implantation/diffusion on targets at about 700 °C. The plasma was developed from a 4:1 argon/oxygen mixture for ∼5 hour processing periods. The target temperature was controlled by means of the bias voltage and the plasma source power. The obtained anatase phases did not require annealing after the plasma oxidation process. The characterization of the film samples was conducted by means of x-ray diffraction, scanning electron microscopy, x-ray photoelectron spectroscopy and Raman spectroscopy

  9. Characteristics of 2-heptanone decomposition using nanosecond pulsed discharge plasma

    Science.gov (United States)

    Nakase, Yuki; Fukuchi, Yuichi; Wang, Douyan; Namihira, Takao; Akiyama, Hidenori; Kumamoto University Collaboration

    2015-09-01

    Volatile organic compounds (VOC) evaporate at room temperature. VOCs typically consist of toluene, benzene and ethyl acetate, which are used in cosmetics, dry cleaning products and paints. Exposure to elevated levels of VOCs may cause headaches, dizziness and irritation to the eyes, nose, and throat; they may also cause environmental problems such as air pollution, acid rain and photochemical smog. As such, they require prompt removal. Nanosecond pulsed discharge is a kind of non-thermal plasma consisting of a streamer discharge. Several advantages of nanosecond pulsed discharge plasma have been demonstrated by studies of our research group, including low heat loss, highly energetic electron generation, and the production of highly active radicals. These advantages have shown ns pulsed discharge plasma capable of higher energy efficiency for processes, such as air purification, wastewater treatment and ozone generation. In this research, nanosecond pulsed discharge plasma was employed to treat 2-heptanone, which is a volatile organic compound type and presents several harmful effects. Characteristics of treatment dependent on applied voltage, gas flow rate and input energy density were investigated. Furthermore, byproducts generated by treatment were also investigated.

  10. Technological plasma source equipped with combined system of vacuum-arc discharge initiation

    International Nuclear Information System (INIS)

    Sysoev, Yu.O.

    2013-01-01

    The construction and the operation principle of erosion plasma source with a three-stage system of vacuum-arc discharge excitation is described. As first two step was used the modified contactless start system with plasma injector, which was widely used in standard plasma sources of the ''Bulat'' systems. The operation principle of the third stage was based on the transition of glow discharge to arc discharge. Coordinated operation of three stages during various stages of coating deposition provided significant increasing of service life and reliability of the system of vacuum-arc discharge initiation and extended the functionality of the plasma source

  11. Aging and its circumvention in rf-plasma oxidized Pb-alloy Josephson junctions

    International Nuclear Information System (INIS)

    Wada, M.; Nakano, J.

    1987-01-01

    The aging phenomenon of Pb-alloy Josephson junctions is investigated and an effective method of circumventing it is presented. Junctions consist of Pb-alloy electrodes and a tunneling barrier formed by rf-plasma oxidation of the Pb-alloy. First, aging and annealing-driven change in normal tunneling resistance are compared to verify the usage of annealing as an experimental method for simulation and acceleration of aging. Next, process variables affecting the annealing change in junction characteristics are examined and their influence is described. The importance of the oxide-base electrode interface is confirmed and that of the counterelectrode-oxide interface is experimentally shown. Furthermore, possible changes in the oxide itself are discussed. Finally, on the basis of these studies, rf-plasma oxidation in a CO 2 atmosphere is employed and proven to be an effective method for circumventing the annealing change in the junction characteristics

  12. Pyrolysis treatment of waste tire powder in a capacitively coupled RF plasma reactor

    Energy Technology Data Exchange (ETDEWEB)

    Huang, H. [Department of Environmental Engineering, Guangdong University of Technology, Waihuanxi Road, Guangzhou 510006 (China); Tang, L. [Department of Civil Engineering, Guangzhou University, Waihuanxi Road, Guangzhou 510006 (China)

    2009-03-15

    A capacitively coupled radio-frequency (RF) plasma reactor was tested mainly for the purpose of solid waste treatment. It was found that using a RF input power between 1600 and 2000 W and a reactor pressure between 3000 and 8000 Pa (absolute pressure), a reactive plasma environment with a gas temperature between 1200 and 1800 K can be reached in this lab scale reactor. Under these conditions, pyrolysis of tire powder gave two product streams: a combustible gas and a pyrolytic char. The major components of the gas product are H{sub 2}, CO, CH{sub 4}, and CO{sub 2} The physical properties (surface area, porosity, and particle morphology) as well as chemical properties (elemental composition, heating value, and surface functional groups) of the pyrolytic char has also been examined. (author)

  13. Interaction of UV laser pulses with reactive dusty plasmas

    NARCIS (Netherlands)

    van de Wetering, F.M.J.H.; Beckers, J.; Nijdam, S.; Oosterbeek, W.; Kovacevic, E.; Berndt, J.

    2016-01-01

    This contribution deals with the effects of UV photons on the synthesis and transport of nanoparticles in reactive complex plasmas (capacitively coupled RF discharge). First measurements showed that the irradiation of a reactive acetylene-argon plasma with high-energy, ns UV laser pulses (355 nm, 75

  14. Analysis on discharge process of a plasma-jet triggered gas spark switch

    Science.gov (United States)

    Weihao, TIE; Cui, MENG; Yuting, ZHANG; Zirang, YAN; Qiaogen, ZHANG

    2018-01-01

    The plasma-jet triggered gas switch (PJTGS) could operate at a low working coefficient with a low jitter. We observed and analyzed the discharge process of the PJTGS at the lowest working coefficient of 47% with the trigger voltage of 40 kV and the pulse energy of 2 J to evaluate the effect of the plasma jet. The temporal and spatial evolution and the optical emission spectrum of the plasma jet were captured. And the spraying delay time and outlet velocity under different gas pressures were investigated. In addition, the particle in cell with Monte Carlo collision was employed to obtain the particle distribution of the plasma jet varying with time. The results show that, the plasma jet generated by spark discharge is sprayed into a spark gap within tens of nanoseconds, and its outlet velocity could reach 104 m s-1. The plasma jet plays a non-penetrating inducing role in the triggered discharge process of the PJTGS. On the one hand, the plasma jet provides the initial electrons needed by the discharge; on the other hand, a large number of electrons focusing on the head of the plasma jet distort the electric field between the head of the plasma jet and the opposite electrode. Therefore, a fast discharge originated from the plasma jet is induced and quickly bridges two electrodes.

  15. RF plasma nitriding of severely deformed iron-based alloys

    International Nuclear Information System (INIS)

    Ferkel, H.; Glatzer, M.; Estrin, Y.; Valiev, R.Z.; Blawert, C.; Mordike, B.L.

    2003-01-01

    The effect of severe plastic deformation by cold high pressure torsion (HPT) on radio frequency (RF) plasma nitriding of pure iron, as well as St2K50 and X5CrNi1810 steels was investigated. Nitriding was carried out for 3 h in a nitrogen atmosphere at a pressure of 10 -5 bar and temperatures of 350 and 400 deg. C. Nitrided specimens were analysed by scanning electron microscopy (SEM), X-ray diffraction and micro hardness measurements. It was found that HPT enhances the effect of nitriding leading almost to doubling of the thickness of the nitrided layer for pure iron and the high alloyed steel. The largest increase in hardness was observed when HPT was combined with RF plasma nitriding at 350 deg. C. In the case of pure iron, the X-ray diffraction spectra showed the formation of ε and γ' nitrides in the compound layer, with a preferential formation of γ' at the expense of the α-phase at the higher nitriding temperature. The corresponding surface hardness was up to 950 HV0.01. While the HPT-processed St2K50 exhibits both nitride phases after nitriding at 350 deg. C, only the γ'-phase was observed after nitriding at 400 deg. C. A surface hardness of up to 1050 HV0.01 was measured for this steel. The high alloyed steel X5CrNi1810 exhibited the highest increase in surface hardness when HPT was combined with nitriding at 350 deg. C. The surface hardness of this steel was greater than 1400 HV0.025. The XRD analyses indicate the formation of the expanded austenite (S-phase) in the surface layer as a result of RF plasma nitriding. Furthermore, after HPT X5CrNi1810 was transformed completely into deformation martensite which did not transform back to austenite under thermochemical treatment. However, in the case of nitriding of the HPT-processed high alloyed steel at 400 deg. C, the formation of the S-phase was less pronounced. In view of the observed XRD peak broadening, the formation of nitrides, such as e.g. CrN, cannot be ruled out

  16. Plasma Sheath Behavior in a Coaxial Discharge Device

    International Nuclear Information System (INIS)

    EL-Aragi, G.; Soliman, H.M.; Masoud, M.M.

    2001-01-01

    The behavior of the plasma sheath has been studied experimentally and theoretically for 3 kJ coaxial discharge device. The discharge takes place in argon gas with pressure of 0.8 mbar. The experiments are conducted with a 10 kV bank charging voltage, which corresponds to 110 kA peak discharge current with time period of 34 μs. The experimental investigations have been studied using a magnetic probes and a miniature Rogowsky coil. A snowplough model is used to drive an analytical solution of the plasma sheath behavior in axial direction. Measurements of radial distribution of plasma sheath current density J r at the muzzle, show that J r has the following relation, J r is proportional to r -1.1 . From the experimental results and theoretical calculations of axial distribution of azimuthal magnetic field induction and plasma sheath velocity, the inclination angle between the normal of the plasma sheath with the axial distance at any axial position is evaluated and it has approximately a constant value for most axial distances. Also, the axial motion of plasma sheath acceleration is estimated experimentally a max = 0.13 x 10 12 ' cm / s 2 at z = 11 cm and from theoretical calculations a max = 0.15 x 10 12 cm/ s 2 at max z = 1.6 cm. A comparison of the experimental results with the theoretical calculations, under the assumption of the snowplough model are not in agreement. (author)

  17. Temporal evolution of the after glow plasma conductivity

    International Nuclear Information System (INIS)

    Surmeian, A.; Diplasu, C.; Musa, G.; Popescu, I-Iovitz

    2001-01-01

    Due to their exhibited advantages over continuous and RF glows, the pulsed discharges gain more attention in a wide variety of application fields, like film deposition, plasma chemistry, semiconductor processing, etc. For this reason, fast time-resolved experimental methods need to be developed in order to control the main parameters of the high voltage pulsed plasmas. It is well known that electric probes present major advantages over many other diagnostic techniques for studying plasma parameters, but the use of these probes in the high voltage pulsed plasmas encounters enormous difficulties. One of them is the issue of galvanic insulation of the probe during the high voltage pulse. Also, the plasma potential may change rapidly, inducing spurious currents in the probe. Other problems could arise in the afterglow when the probe can exert great influence over the plasma potential by the current that it draws from the plasma. In this paper, we proposed a new method for the determination of the electrical conductivity of the afterglow of the high voltage pulsed discharges, using a low frequency RF plane probe. The application of a small low frequency signal to the plane probe could successfully eliminate all the disadvantages mentioned above. (authors)

  18. Electrohydraulic Discharges and Nonthermal Plasma for Water Treatment

    Czech Academy of Sciences Publication Activity Database

    Locke, B.R.; Sato, M.; Hoffman, M.R.; Chang, J.S.; Šunka, Pavel

    2006-01-01

    Roč. 45, č. 1 (2006), s. 882-905 ISSN 0888-5885 Institutional research plan: CEZ:AV0Z20430508 Keywords : Electrical discharges * water cleaning * environmental applications * liquid phase reactor Subject RIV: BL - Plasma and Gas Discharge Physics Impact factor: 1.518, year: 2006

  19. Experimental study of unipolar arcs in a low pressure mercury discharge

    International Nuclear Information System (INIS)

    Johnson, C.T.

    1979-01-01

    An experimental study of unipolar arcs was conducted in a low pressure mercury discharge inductively heated with RF. The results were found to be consistent with the concept of a sheath mechanism for driving the unipolar arcs. Floating double-probe measurements of the unipolar arc plasma parameters yielded electron temperatures of approx. 2 eV and electron number densities of approx. 1 x 10 11 cm -3 assuming quasi-neutral plasma conditions. The variation of the unipolar arc current with: (1) the RF power input; and (2) the metal surface area exposed to the plasma verified the predicted dependence of the arc current on the plasma parameters and the metal surface area. Finally, alternative mechanisms for sustaining the observed arcs by high frequency rectification were ruled out on the basis of the recorded current waveforms of the unipolar arcs

  20. Enhancement of hydrophobicity and tensile strength of muga silk fiber by radiofrequency Ar plasma discharge

    International Nuclear Information System (INIS)

    Gogoi, D.; Choudhury, A.J.; Chutia, J.; Pal, A.R.; Dass, N.N.; Devi, D.; Patil, D.S.

    2011-01-01

    The hydrophobicity and tensile strength of muga silk fiber are investigated using radiofrequency (RF) Ar plasma treatment at various RF powers (10-30 W) and treatment times (5-20 min). The Ar plasma is characterized using self-compensated Langmuir and emissive probe. The ion energy is observed to play an important role in determining the tensile strength and hydrophobicity of the plasma treated fibers. The chemical compositions of the fibers are observed to be affected by the increase in RF power rather than treatment time. XPS study reveals that the ions that are impinging on the substrates are mainly responsible for the cleavage of peptide bond and side chain of amino acid groups at the surface of the fibers. The observed properties (tensile strength and hydrophobicity) of the treated fibers are found to be dependent on their variation in atomic concentration and functional composition at the surfaces. All the treated muga fibers exhibit almost similar thermal behavior as compared to the virgin one. At RF power of 10 W and treatment time range of 5-20 min, the treated fibers exhibit properties similar to that of the virgin one. Higher RF power (30 W) and the increase in treatment time deteriorate the properties of the fibers due to incorporation of more surface roughness caused by sufficiently high energetic ion bombardment. The properties of the plasma treated fibers are attempted to correlate with the XPS analysis and their surface morphologies.

  1. Simulation of rarefied low pressure RF plasma flow around the sample

    Science.gov (United States)

    Zheltukhin, V. S.; Shemakhin, A. Yu

    2017-01-01

    The paper describes a mathematical model of the flow of radio frequency plasma at low pressure. The hybrid mathematical model includes the Boltzmann equation for the neutral component of the RF plasma, the continuity and the thermal equations for the charged component. Initial and boundary conditions for the corresponding equations are described. The electron temperature in the calculations is 1-4 eV, atoms temperature in the plasma clot is (3-4) • 103 K, in the plasma jet is (3.2-10) • 102 K, the degree of ionization is 10-7-10-5, electron density is 1015-1019 m-3. For calculations plasma parameters is developed soft package on C++ program language, that uses the OpenFOAM library package. Simulations for the vacuum chamber in the presence of a sample and the free jet flow were carried out.

  2. Discharge Characteristics of DC Arc Water Plasma for Environmental Applications

    Science.gov (United States)

    Li, Tianming; Sooseok, Choi; Takayuki, Watanabe

    2012-12-01

    A water plasma was generated by DC arc discharge with a hafnium embedded rod-type cathode and a nozzle-type anode. The discharge characteristics were examined by changing the operation parameter of the arc current. The dynamic behavior of the arc discharge led to significant fluctuations in the arc voltage and its frequency. Analyses of the high speed image and the arc voltage waveform showed that the arc discharge was in the restrike mode and its frequency varied within several tens of kilohertz according to the operating conditions. The larger thermal plasma volume was generated by the higher flow from the forming steam with a higher restrike frequency in the higher arc current conditions. In addition, the characteristics of the water plasma jet were investigated by means of optical emission spectroscopy to identify the abundant radicals required in an efficient waste treatment process.

  3. Nonlinear plasma experiments in geospace with gigawatts of RF power at HAARP

    Energy Technology Data Exchange (ETDEWEB)

    Sheerin, J. P., E-mail: jsheerin@emich.edu [Physics and Astronomy, Eastern Michigan Univ., Ypsilanti, MI 48197 (United States); Cohen, Morris B., E-mail: mcohen@gatech.edu [Electrical and Computer Engineering, Georgia Tech, Atlanta, GA 30332-0250 (United States)

    2015-12-10

    The ionosphere is the ionized uppermost layer of our atmosphere (from 70 – 500 km altitude) where free electron densities yield peak critical frequencies in the HF (3 – 30 MHz) range. The ionosphere thus provides a quiescent plasma target, stable on timescales of minutes, for a whole host of active plasma experiments. High power RF experiments on ionospheric plasma conducted in the U.S. have been reported since 1970. The largest HF transmitter built to date is the HAARP phased-array HF transmitter near Gakona, Alaska which can deliver up to 3.6 Gigawatts (ERP) of CW RF power in the range of 2.8 – 10 MHz to the ionosphere with microsecond pointing, power modulation, and frequency agility. With an ionospheric background thermal energy in the range of only 0.1 eV, this amount of power gives access to the highest regimes of the nonlinearity (RF intensity to thermal pressure) ratio. HAARP’s unique features have enabled the conduct of a number of unique nonlinear plasma experiments in the interaction region of overdense ionospheric plasma including generation of artificial aurorae, artificial ionization layers, VLF wave-particle interactions in the magnetosphere, parametric instabilities, stimulated electromagnetic emissions (SEE), strong Langmuir turbulence (SLT) and suprathermal electron acceleration. Diagnostics include the Modular UHF Ionospheric Radar (MUIR) sited at HAARP, the SuperDARN-Kodiak HF radar, spacecraft radio beacons, HF receivers to record stimulated electromagnetic emissions (SEE) and telescopes and cameras for optical emissions. We report on short timescale ponderomotive overshoot effects, artificial field-aligned irregularities (AFAI), the aspect angle dependence of the intensity of the HF-enhanced plasma line, and production of suprathermal electrons. One of the primary missions of HAARP, has been the generation of ELF (300 – 3000 Hz) and VLF (3 – 30 kHz) radio waves which are guided to global distances in the Earth

  4. Electron current extraction from radio frequency excited micro-dielectric barrier discharges

    International Nuclear Information System (INIS)

    Wang, Jun-Chieh; Kushner, Mark J.; Leoni, Napoleon; Birecki, Henryk; Gila, Omer

    2013-01-01

    Micro dielectric barrier discharges (mDBDs) consist of micro-plasma devices (10–100 μm diameter) in which the electrodes are fully or partially covered by dielectrics, and often operate at atmospheric pressure driven with radio frequency (rf) waveforms. In certain applications, it may be desirable to extract electron current out of the mDBD plasma, which necessitates a third electrode. As a result, the physical structure of the m-DBD and the electron emitting properties of its materials are important to its operation. In this paper, results from a two-dimensional computer simulation of current extraction from mDBDs sustained in atmospheric pressure N 2 will be discussed. The mDBDs are sandwich structures with an opening of tens-of-microns excited with rf voltage waveforms of up to 25 MHz. Following avalanche by electron impact ionization in the mDBD cavity, the plasma can be expelled from the cavity towards the extraction electrode during the part of the rf cycle when the extraction electrode appears anodic. The electron current extraction can be enhanced by biasing this electrode. The charge collection can be controlled by choice of rf frequency, rf driving voltage, and permittivity of the dielectric barrier.

  5. Thermo-structural modelling of a plasma discharge tube for electric propulsion

    International Nuclear Information System (INIS)

    Faoite, D. de; Browne, D.J.; Del Valle Gamboa, J.I.; Stanton, K.T.

    2016-01-01

    Highlights: • Thermo-structural analyses were performed for an electric propulsion space thruster. • Thermal stresses arise primarily from mismatches in thermal expansion coefficients. • Aluminium nitride is a suitable material for a plasma containment tube. • A design is presented allowing a thruster to operate at a power of at least 250 kW. - Abstract: Potential thermal management strategies for the plasma generation section of a VASIMR"® high-power electric propulsion space thruster are assessed. The plasma is generated in a discharge tube using helicon waves. The plasma generation process causes a significant thermal load on the plasma discharge tube and on neighbouring components, caused by cross-field particle diffusion and UV radiation. Four potential cooling system design strategies are assessed to deal with this thermal load. Four polycrystalline ceramics are evaluated for use as the plasma discharge tube material: alumina, aluminium nitride, beryllia, and silicon nitride. A finite element analysis (FEA) method was used to model the steady-state temperature and stress fields resulting from the plasma heat flux. Of the four materials assessed, aluminium nitride would result in the lowest plasma discharge tube temperatures and stresses. It was found that a design consisting of a monolithic ceramic plasma containment tube fabricated from aluminium nitride would be capable of operating up to a power level of at least 250 kW.

  6. Shock wave interaction with pulsed glow discharge and afterglow plasmas

    International Nuclear Information System (INIS)

    Podder, N.K.; LoCascio, A.C.

    2009-01-01

    Acoustic shock waves are launched by the spark-discharge of a high voltage capacitor in pulsed glow discharge and afterglow plasmas. The glow discharge section of the shock tube is switched on for a period of less than one second at a time, during which a shock wave is launched starting with a large delay between the plasma switch-on and the shock-launch. In the subsequent runs this delay is decremented in equal time intervals up to the plasma switch-on time. A photo acoustic deflection method sensitive to the density gradient of the shock wave is used to study the propagating shock structure and velocity in the igniting plasma. A similar set of measurements are also performed at the plasma switch-off, in which the delay time is incremented in equal time intervals from the plasma switch-off time until the afterglow plasma fully neutralizes itself into the room-temperature gas. Thus, complete time histories of the shock wave propagation in the igniting plasma, as well as in the afterglow plasma, are produced. In the igniting plasma, the changes in the shock-front velocity and dispersion are found to be a strong non-linear function of delay until a saturation point is reached. On the other hand, in the afterglow plasma the trend has been opposite and reversing towards the room temperature values. The observed shock wave properties in both igniting and afterglow plasmas correlate well with the inferred temperature changes in the two plasmas

  7. Removal of carbon contaminations by RF plasma generated reactive species and subsequent effects on optical surface

    Energy Technology Data Exchange (ETDEWEB)

    Yadav, P. K., E-mail: praveenyadav@rrcat.gov.in; Rai, S. K.; Modi, M. H.; Nayak, M.; Lodha, G. S. [Indus Synchrotron Utilization Division, Raja Ramanna Centre for Advanced Technology, Indore-452013 (India); Kumar, M.; Chakera, J. A.; Naik, P. A. [Laser Plasma Laboratory, Laser Plasma Division, Raja Ramanna Centre for Advanced Technology, Indore-452013 (India)

    2015-06-24

    Carbon contamination on optical elements is a serious issue in synchrotron beam lines for several decades. The basic mechanism of carbon deposition on optics and cleaning strategies are not fully understood. Carbon growth mechanism and optimized cleaning procedures are worldwide under development stage. Optimized RF plasma cleaning is considered an active remedy for the same. In present study carbon contaminated optical test surfaces (carbon capped tungsten thin film) are exposed for 30 minutes to four different gases, rf plasma at constant power and constant dynamic pressure. Structural characterization (thickness, roughness and density) of virgin samples and plasma exposed samples was done by soft x-ray (λ=80 Å) reflectivity measurements at Indus-1 reflectivity beam line. Different gas plasma removes carbon with different rate (0.4 to 0.65 nm /min). A thin layer 2 to 9 nm of different roughness and density is observed at the top surface of tungsten film. Ar gas plasma is found more suitable for cleaning of tungsten surface.

  8. Sterilization and decontamination of surfaces using atmospheric pressure plasma discharges

    Energy Technology Data Exchange (ETDEWEB)

    Garate, E.; Gornostaeva, O.; Alexeff, I.; Kang, W.L.

    1999-07-01

    The goal of the program is to demonstrate that an atmospheric pressure plasma discharge can rapidly and effectively sterilize or decontaminate surfaces that are contaminated with model biological and chemical warfare agents. The plasma is produced by corona discharge from an array of pins and a ground plane. The array is constructed so that various gases, like argon or helium, can be flowed past the pins where the discharge is initiated. The pin array can be biased using either DC. AC or pulsed discharges. the work done to date has focused on the sterilization of aluminum, polished steel and tantalum foil metal coupons, about 2 cm on a side and 2 mm thick, which have been inoculated with up to 10{sup 6} spores per coupon of Bacillus subtilis var niger or Bascillus stearothermorphilus. Results indicate that 5 minute exposures to the atmospheric pressure plasma discharge can reduce the viable spore count by 4 orders of magnitude. The atmospheric pressure discharge is also effective in decomposing organic phosphate compounds that are stimulants for chemical warfare agents. Details of the decomposition chemistry, by-product formation, and electrical energy consumption of the system will be discussed.

  9. Plasma processes in water under effect of short duration pulse discharges

    Science.gov (United States)

    Gurbanov, Elchin

    2013-09-01

    It is very important to get a clear water without any impurities and bacteria by methods, that don't change the physical and chemical indicators of water now. In this article the plasma processes during the water treatment by strong electric fields and short duration pulse discharges are considered. The crown discharge around an electrode with a small radius of curvature consists of plasma leader channels with a high conductivity, where the thermo ionization processes and UV-radiation are taken place. Simultaneously the partial discharges around potential electrode lead to formation of atomic oxygen and ozone. The spark discharge arises, when plasma leader channels cross the all interelectrode gap, where the temperature and pressure are strongly grown. As a result the shock waves and dispersing liquid streams in all discharge gap are formed. The plasma channels extend, pressure inside it becomes less than hydrostatic one and the collapse and UV-radiation processes are started. The considered physical processes can be successfully used as a basis for development of pilot-industrial installations for conditioning of drinking water and to disinfecting of sewage.

  10. rf coupler technology for fusion applications

    International Nuclear Information System (INIS)

    Hoffman, D.J.

    1983-01-01

    Radio frequency (rf) oscillations at critical frequencies have successfully provided a means to convey power to fusion plasmas due to the electrical-magnetic properties of the plasma. While large rf systems to couple power to the plasma have been designed, built, and tested, the main link to the plasma, the coupler, is still in an evolutionary stage of development. Design and fabrication of optimal antennas for fusion applications are complicated by incomplete characterizations of the harsh plasma environment and of coupling mechanisms. A brief description of rf coupler technology required for plasma conditions is presented along with an assessment of the status and goals of coupler development

  11. Plasma rotation by electric and magnetic fields in a discharge cylinder

    Science.gov (United States)

    Wilhelm, H. E.; Hong, S. H.

    1977-01-01

    A theoretical model for an electric discharge consisting of a spatially diverging plasma sustained electrically between a small ring cathode and a larger ring anode in a cylindrical chamber with an axial magnetic field is developed to study the rotation of the discharge plasma in the crossed electric and magnetic fields. The associated boundary-value problem for the coupled partial differential equations which describe the electric potential and the plasma velocity fields is solved in closed form. The electric field, current density, and velocity distributions are discussed in terms of the Hartmann number and the Hall coefficient. As a result of Lorentz forces, the plasma rotates with speeds as high as 1 million cm/sec around its axis of symmetry at typical conditions. As an application, it is noted that rotating discharges of this type could be used to develop a high-density plasma-ultracentrifuge driven by j x B forces, in which the lighter (heavier) ion and atom components would be enriched in (off) the center of the discharge cylinder.

  12. Feasibility of arc-discharge and plasma-sputtering methods in cleaning plasma-facing and diagnostics components of fusion reactors

    Energy Technology Data Exchange (ETDEWEB)

    Hakola, Antti, E-mail: antti.hakola@vtt.fi [VTT Technical Research Centre of Finland, VTT (Finland); Likonen, Jari [VTT Technical Research Centre of Finland, VTT (Finland); Karhunen, Juuso; Korhonen, Juuso T. [Department of Applied Physics, Aalto University (Finland); Aints, Märt; Laan, Matti; Paris, Peeter [Department of Physics, University of Tartu (Estonia); Kolehmainen, Jukka; Koskinen, Mika; Tervakangas, Sanna [DIARC-Technology Oy, Espoo (Finland)

    2015-10-15

    Highlights: • Feasibility of the arc-discharge and plasma-sputtering techniques in removing deposited layers from ITER-relevant samples demonstrated. • Samples with the size of an A4 paper can be cleaned from 1-μm thick deposited layers in 10–20 minutes by the arc-discharge method. • The plasma-sputtering method is 5–10 times slower but the resulting surfaces are very smooth. • Arc-discharge method could be used for rapid cleaning of plasma-facing components during maintenance shutdowns of ITER, plasma sputtering is preferred for diagnostics mirrors. - Abstract: We have studied the feasibility of arc-discharge and plasma-sputtering methods in removing deposited layers from ITER-relevant test samples. Prototype devices have been designed and constructed for the experiments and the cleaning process is monitored by a spectral detection system. The present version of the arc-discharge device is capable of removing 1-μm thick layers from 350-mm{sup 2} areas in 4–8 s, but due to the increased roughness of the cleaned surfaces and signs of local melting, mirror-like surfaces cannot be treated by this technique. The plasma-sputtering approach, for its part, is some 5–10 times slower in removing the deposited layers but no changes in surface roughness or morphology of the samples could be observed after the cleaning phase. The arc-discharge technique could therefore be used for rapid cleaning of plasma-facing components during maintenance shutdowns of ITER while in the case of diagnostics mirrors plasma sputtering is preferred.

  13. Luminescent Characteristics of a Pulsed Discharge Plasma in Xe-KBr Mixture

    Science.gov (United States)

    Heneral, A. A.; Zhmenyak, Y. V.

    2018-03-01

    A mixture of xenon with a nontoxic halogen carrier Xe-KBr is used to create a plasma radiation source at the 282-nm transition of the XeBr* molecule excited by a high-voltage pulsed-periodic discharge. The luminescence spectra of the plasma of a longitudinal pulsed-periodic discharge in the Xe-KBr mixture at low pressures are studied experimentally. The most intense UV bands of exciplex XeBr* molecules are recorded in the spectral range of 250-350 nm. The spectral, temporal, and energetic characteristics of the radiation source are presented, as well as the dependence of the XeBr* exciplex molecule formation efficiency on the discharge excitation conditions. The optimal conditions for the excitation of UV radiation in the pulsed-periodic discharge plasma are determined.

  14. Plasma treatment of bulk niobium surface for superconducting rf cavities: Optimization of the experimental conditions on flat samples

    Directory of Open Access Journals (Sweden)

    M. Rašković

    2010-11-01

    Full Text Available Accelerator performance, in particular the average accelerating field and the cavity quality factor, depends on the physical and chemical characteristics of the superconducting radio-frequency (SRF cavity surface. Plasma based surface modification provides an excellent opportunity to eliminate nonsuperconductive pollutants in the penetration depth region and to remove the mechanically damaged surface layer, which improves the surface roughness. Here we show that the plasma treatment of bulk niobium (Nb presents an alternative surface preparation method to the commonly used buffered chemical polishing and electropolishing methods. We have optimized the experimental conditions in the microwave glow discharge system and their influence on the Nb removal rate on flat samples. We have achieved an etching rate of 1.7  μm/min⁡ using only 3% chlorine in the reactive mixture. Combining a fast etching step with a moderate one, we have improved the surface roughness without exposing the sample surface to the environment. We intend to apply the optimized experimental conditions to the preparation of single cell cavities, pursuing the improvement of their rf performance.

  15. Simulation of rarefied low pressure RF plasma flow around the sample

    International Nuclear Information System (INIS)

    Zheltukhin, V S; Shemakhin, A Yu

    2017-01-01

    The paper describes a mathematical model of the flow of radio frequency plasma at low pressure. The hybrid mathematical model includes the Boltzmann equation for the neutral component of the RF plasma, the continuity and the thermal equations for the charged component. Initial and boundary conditions for the corresponding equations are described. The electron temperature in the calculations is 1-4 eV, atoms temperature in the plasma clot is (3-4) • 10 3 K, in the plasma jet is (3.2-10) • 10 2 K, the degree of ionization is 10 -7 -10 -5 , electron density is 10 15 -10 19 m -3 . For calculations plasma parameters is developed soft package on C++ program language, that uses the OpenFOAM library package. Simulations for the vacuum chamber in the presence of a sample and the free jet flow were carried out. (paper)

  16. Novel concept of electric discharge oxygen-iodine laser

    Czech Academy of Sciences Publication Activity Database

    Schmiedberger, Josef; Jirásek, Vít; Kodymová, Jarmila; Rohlena, Karel

    2009-01-01

    Roč. 54, č. 2 (2009), 239-248 ISSN 1434-6060 R&D Projects: GA ČR GA202/07/0323 Grant - others:US Air Force EOARD(US) FA8655-06-1-3034 Institutional research plan: CEZ:AV0Z10100523 Keywords : chemical lasers * plasma torches * high-frequency and RF discharges Subject RIV: BH - Optics, Masers, Lasers Impact factor: 1.420, year: 2009

  17. Optical characteristics of a RF DBD plasma jet in various {Ar}/ {O}_{2}Ar/O2 mixtures

    Science.gov (United States)

    Falahat, A.; Ganjovi, A.; Taraz, M.; Ravari, M. N. Rostami; Shahedi, A.

    2018-02-01

    In this paper, using the optical emission spectroscopy (OES) technique, the optical characteristics of a radiofrequency (RF) plasma jet are examined. The Ar/O2 mixture is taken as the operational gas and, the Ar percentage in the Ar/O2 mixture is varied from 70% to 95%. Using the optical emission spectrum analysis of the RF plasma jet, the excitation temperature is determined based on the Boltzmann plot method. The electron density in the plasma medium of the RF plasma jet is obtained by the Stark broadening of the hydrogen Balmer H_{β }. It is mostly seen that, the radiation intensity of Ar 4p→ 4s transitions at higher argon contributions in Ar/O2 mixture is higher. It is found that, at higher Ar percentages, the emission intensities from atomic oxygen (O) are higher and, the line intensities from the argon atoms and ions including O atoms linearly increase. It is observed that the quenching of Ar^{*} with O2 results in higher O species with respect to O2 molecules. In addition, at higher percentages of Ar in the Ar/O2 mixture, while the excitation temperature is decreased, the electron density is increased.

  18. A study of plasma parameters in hollow cathode plasma jet in pulse regime

    Czech Academy of Sciences Publication Activity Database

    Kudrna, P.; Klusoň, J.; Leshkov, S.; Chichina, M.; Picková, I.; Hubička, Zdeněk; Tichý, M.

    2010-01-01

    Roč. 50, č. 9 (2010), s. 886-891 ISSN 0863-1042 R&D Projects: GA ČR GA202/09/0800 Institutional research plan: CEZ:AV0Z10100522 Keywords : thin-films * system * deposition * RF * nitride Subject RIV: BL - Plasma and Gas Discharge Physics Impact factor: 1.006, year: 2010

  19. Observation of enhanced electric field in an RF-plugged sheet plasma in the RFC-XX-M open-ended machine

    International Nuclear Information System (INIS)

    Oda, T.; Takiyama, K.; Kadota, K.

    1987-12-01

    We report nonperturbing observation of the electric field in the sheet plasma for RF end-plugging on the RFC XX-M open-ended machine by using the Stark effect with a combined technique of beam-probe and laser-induced fluorescence. Under the optimum condition for the RF plugging, enhanced electric field is found in the sheet plasma by about 2.5 times with respect to the electric field when no plasma is produced. The field spatial profile is also measured, which is discussed in connection with the electrostatic eigenmode. (author)

  20. Diagnostics of N2 Ar plasma mixture excited in a 13.56 MHz hollow cathode discharge system: application to remote plasma treatment of polyamide surface

    Science.gov (United States)

    Saloum, S.; Naddaf, M.; Alkhaled, B.

    2008-02-01

    N2-x% Ar plasma gas mixture, generated in a hollow cathode RF discharge system, has been characterized by both optical emission spectroscopy (OES) and double Langmuir probe, as a function of experimental parameters: total pressure (5-33 Pa), and different fractions of argon (7 <= x <= 80), at a constant applied RF power of 300 W. N2 dissociation degree has been investigated qualitatively by both the actinometry method and the ratio I_N/I_{N_2} of the atomic nitrogen line emission intensity at 672.3 nm to the vibrational band (0-0) of the N2 second positive system at 337.1 nm. Both methods showed that the increase in argon fraction enhances the dissociation of N2, with a maximum at x = 50 for the pressure of 5 Pa, although the two methods give two opposite trends as a function of total pressure. Spectroscopic measurements showed that the vibrational temperature of the N2 second positive system increases with both argon fraction and total pressure increase, it lies between 4900 and 12 300 K. Langmuir probe measurements showed that, in the remote zone, the electron temperature falls in the range 1.57-1.75 eV, the N_{2}^{+} density varies between 5 × 109 and 1.4 × 1010 cm-3 and that both the plasma ionization degree and electron temperature increase towards the source. In addition, the process of plasma-polyamide (PA) surface interaction, in the remote plasma zone, has been studied through OES analysis during plasma treatment of PA to monitor the possible emissions due to the polymer etching. An increase in atomic nitrogen line (672.3 nm) intensity is obtained, atomic carbon line (833.52 nm) and the band emission (0-0) from the CN (B 2Σ+-X 2Σ+) violet system were observed. The PA surface modification has been confirmed through the improvement of its hydrophilic character as the water contact angle measured after the plasma treatment significantly decreased.

  1. Diagnostics of N2-Ar plasma mixture excited in A 13.56 MHz hollow cathode discharge system: Application to remote plasma treatment of polyamide surface

    International Nuclear Information System (INIS)

    Saloum, S.; Naddaf, M.; Al-khaled, B.

    2009-01-01

    N 2 -x % Ar plasma gas mixture, generated in a hollow cathode RF discharge system, has been characterized by both optical emission spectroscopy (OES) and double langmuir probe, as a function of experimental parameters: Total pressure (5-33 Pa), and different fractions of argon (7≤ x ≤ 80), at a constant applied RF power of 300 W. N 2 dissociation degree has been investigated qualitatively by both actinometry method and the ratio of the atomic nitrogen line emission intensity at 672.3 nm to the vibrational band (0-0) of the N 2 second positive system at 337.1 nm. Both methods showed that the increase of argon fraction enhances the dissociation of N 2 , with a maximum at x=50 for the pressure of 5 Pa, although the two methods give two opposite trends as a function of total pressure. Spectroscopic measurements showed that the vibrational temperature of N 2 second positive system increases with both argon fraction and total pressure increase, it lies between 4900 K and 12300 K. Langmuir probe measurements showed that, in the remote zone, the electron temperature falls in the range 1.57-1.75 eV, the N 2 + density varies between 5.10 9 cm-3 and 1.4 10 10 cm -3 , and that both the plasma ionization degree and electron temperature increase towards the source. In addition, the process of plasma-polyamide surface interaction, in the remote plasma zone, has been studied through optical emission spectroscopy analysis during plasma treatment of polyamide to monitor the possible emissions due to the polymer etching. An increase of atomic nitrogen line (672.3 nm) intensity is obtained, atomic carbon line (833.52 nm) and the band emission (0-0) from CN (B 2 Σ + -X 2 Σ + ) violet system were observed. The polyamide surface modification has been confirmed through the improvement of its hydrophilic character as the water contact angle measured after the plasma treatment significantly decreased. (author)

  2. Diagnostics of N2-Ar plasma mixture excited in a 13.56 MHz hollow cathode discharge system: application to remote plasma treatment of polyamide surface

    International Nuclear Information System (INIS)

    Saloum, S; Naddaf, M; Alkhaled, B

    2008-01-01

    N 2 -x% Ar plasma gas mixture, generated in a hollow cathode RF discharge system, has been characterized by both optical emission spectroscopy (OES) and double Langmuir probe, as a function of experimental parameters: total pressure (5-33 Pa), and different fractions of argon (7 ≤ x ≤ 80), at a constant applied RF power of 300 W. N 2 dissociation degree has been investigated qualitatively by both the actinometry method and the ratio I N /I N 2 of the atomic nitrogen line emission intensity at 672.3 nm to the vibrational band (0-0) of the N 2 second positive system at 337.1 nm. Both methods showed that the increase in argon fraction enhances the dissociation of N 2 , with a maximum at x = 50 for the pressure of 5 Pa, although the two methods give two opposite trends as a function of total pressure. Spectroscopic measurements showed that the vibrational temperature of the N 2 second positive system increases with both argon fraction and total pressure increase, it lies between 4900 and 12 300 K. Langmuir probe measurements showed that, in the remote zone, the electron temperature falls in the range 1.57-1.75 eV, the N 2 + density varies between 5 x 10 9 and 1.4 x 10 10 cm -3 and that both the plasma ionization degree and electron temperature increase towards the source. In addition, the process of plasma-polyamide (PA) surface interaction, in the remote plasma zone, has been studied through OES analysis during plasma treatment of PA to monitor the possible emissions due to the polymer etching. An increase in atomic nitrogen line (672.3 nm) intensity is obtained, atomic carbon line (833.52 nm) and the band emission (0-0) from the CN (B 2 Σ + -X 2 Σ + ) violet system were observed. The PA surface modification has been confirmed through the improvement of its hydrophilic character as the water contact angle measured after the plasma treatment significantly decreased

  3. Determination of plasma spot current and arc discharge plasma current on the system of plasma cathode electron sources using Rogowski coil technique

    International Nuclear Information System (INIS)

    Wirjoadi; Bambang Siswanto; Lely Susita RM; Agus Purwadi; Sudjatmoko

    2015-01-01

    It has been done the function test experiments of ignitor electrode system and the plasma generator electrode system to determine the current spot plasma and arc discharge plasma current with Rogowski coil technique. Ignitor electrode system that gets power supply from IDPS system can generate the plasma spot current of 11.68 ampere to the pulse width of about 33 μs, this value is greater than the design probably because of electronic components used in the IDPS system was not as planned. For the plasma generator electrode system that gets power from ADPS system capable of producing an arc discharge plasma current around 103.15 amperes with a pulse width of about 96 μs, and this value as planned. Based on the value of the arc discharge plasma current can be determined plasma electron density, which is about 10.12 10"1"9 electrons/m"3, and with this electron density value, an ignitor electrode system and a plasma generator system is quite good if used as a plasma cathode electron source system. (author)

  4. Research on the Plasma Anemometer Based on AC Glow Discharge

    Directory of Open Access Journals (Sweden)

    Bing Yu

    2017-01-01

    Full Text Available A new plasma anemometer based on AC glow discharge is designed in this article. Firstly, theoretical analysis of plasma anemometer working principle is introduced to prove the feasibility of the experimental measurement method. Then the experiments are carried out to study the effects of different parameters on the static discharge characteristics of the plasma anemometer system, by which the system optimization methods are obtained. Finally, several groups of appropriate parameters are selected to build the plasma anemometer system based on resistance capacitance coupling negative feedback AC glow discharge, and different airflow speeds are applied to obtain the achievable velocity measurement range. The results show that there is a linear relationship between airflow velocity and discharge current in an allowable error range, which can be applied for airflow velocity measurement. Negative feedback coupling module, which is composed of the coupling resistance and the coupling capacitance, has good effects on improving the system stability. The measurement range of the airflow velocity is significantly increased when the electrode gap is 3 mm, coupling resistance is 470 Ω, and coupling capacitance is 220 pF.

  5. Determination of the spatial characteristics of an RF electrodeless discharge by the method of emission tomography

    International Nuclear Information System (INIS)

    Denisova, N. V.; Revalde, G.; Skudra, A.

    2006-01-01

    The spatial distribution of the density of mercury atoms in the 7 3 S state in a spherical RF electrode-less gas-discharge lamp is reconstructed by the method of emission tomography. The local values of the corresponding emission coefficients, which are proportional to the density of mercury atoms in the 7 3 S state, are determined from integral (over the plasma volume) measurements of the lamp radiation at a wavelength of 546.1 nm with the help of an algorithm based on the maximum entropy method. The results obtained show that, for all of the operating modes under study, the profile of the density of mercury atoms in the 7 3 S state has a minimum in the center of the lamp and a maximum near its wall. At a generator current of 100 mA and cold-spot temperature of 41 deg. C, the density of mercury atoms in the 7 3 S state is observed to drop substantially both in the center of the lamp and near its wall, the density in the center being reduced to almost zero. An explanation of this phenomenon is proposed

  6. Ion cyclotron emission in tokamak plasmas; Emission cyclotronique ionique dans les plasmas de tokamak

    Energy Technology Data Exchange (ETDEWEB)

    Fraboulet, D.

    1996-09-17

    Detection of {alpha}(3.5 MeV) fusion products will be of major importance for the achievement of self sustained discharges in fusion thermonuclear reactors. Due to their cyclotronic gyration in the confining magnetic field of a tokamak, {alpha} particles are suspected to radiate in the radio-frequency band [RF: 10-500 MHz]. Our aim is to determine whether detection of RF emission radiated from a reactor plasma can provide information concerning those fusion products. We observed experimentally that the RF emission radiated from fast ions situated in the core of the discharge is detectable with a probe located at the plasma edge. For that purpose, fast temporal acquisition of spectral power was achieved in a narrow frequency band. We also propose two complementary models for this emission. In the first one, we describe locally the energy transfer between the photon population and the plasma and we compute the radiation equilibrium taking place in the tokamak. {alpha} particles are not the unique species involved in the equilibrium and it is necessary to take into account all other species present in the plasma (Deuterium, Tritium, electrons,...). Our second model consists in the numerical resolution of the Maxwell-Vlasov with the use of a variational formulation, in which all polarizations are considered and the 4 first cyclotronic harmonics are included in a 1-D slab geometry. The development of this second model leads to the proposal for an experimental set up aiming to the feasibility demonstration of a routine diagnostic providing the central {alpha} density in a reactor. (author). 166 refs.

  7. The Bohm Criterion for Radiofrequency Discharges - a Numerical Verification Based on Poisson Equation

    NARCIS (Netherlands)

    Meijer, P. M.; W. J. Goedheer,

    1993-01-01

    Recently it was shown that, by using the analysis of electrostatic waves entering the plasma-sheath edge, the direct-current (dc) Bohm criterion also holds for discharges under radio-frequency (rf) conditions. In this paper, the influence of Bohm's criterion on the sheath characteristics for

  8. Water Treatment Using Plasma Discharge with Variation of Electrode Materials

    Science.gov (United States)

    Chanan, N.; Kusumandari; Saraswati, T. E.

    2018-03-01

    This research studied water treatment using plasma discharge. Plasma generated in this study produced active species that played a role in organic compound decomposition. The plasma reactor consisted of two needle electrodes made from stainless steel, tungsten, aluminium and grafit. It placed approximately 2 mm above the solution and connected with high-AC voltage. A solution of methylene blue used as an organic solution model. Plasma treatment times were 2, 4, 6, 8 and 10 min. The absorbance, temperature and pH of the solution were measured before and after treatment using various electrodes. The best electrode used in plasma discharging for methylene blue absorbance reduction was the graphite electrode, which provided the highest degradation efficiency of 98% at 6 min of treatment time.

  9. Modification of the surface properties of glass-ceramic materials at low-pressure RF plasma stream

    Science.gov (United States)

    Tovstopyat, Alexander; Gafarov, Ildar; Galeev, Vadim; Azarova, Valentina; Golyaeva, Anastasia

    2018-05-01

    The surface roughness has a huge effect on the mechanical, optical, and electronic properties of materials. In modern optical systems, the specifications for the surface accuracy and smoothness of substrates are becoming even more stringent. Commercially available pre-polished glass-ceramic substrates were treated with the radio frequency (RF) inductively coupled (13.56 MHz) low-pressure plasma to clean the surface of the samples and decrease the roughness. Optical emission spectroscopy was used to investigate the plasma stream parameters and phase-shifted interferometry to investigate the surface of the specimen. In this work, the dependence of RF inductively coupled plasma on macroscopic parameters was investigated with the focus on improving the surfaces. The ion energy, sputtering rate, and homogeneity were investigated. The improvements of the glass-ceramic surfaces from 2.6 to 2.2 Å root mean square by removing the "waste" after the previous operations had been achieved.

  10. Transition from Townsend to radio-frequency homogeneous dielectric barrier discharge in a roll-to-roll configuration

    International Nuclear Information System (INIS)

    Bazinette, R.; Paillol, J.; Massines, F.

    2016-01-01

    The aim of this paper is to better understand the transition from Townsend to radio-frequency homogeneous dielectric barrier discharge (DBD) at atmospheric pressure. The study is done in an Ar/NH 3 Penning mixture for an electrode configuration adapted to roll-to-roll plasma surface treatment. The study was led in a frequency range running from 50 kHz up to 8.3 MHz leading to different DBD modes with a 1 mm gas gap: Glow (GDBD), Townsend (TDBD), and Radio-frequency (RF-DBD). In the frequency range between TDBD and RF-DBD, from 250 kHz to 2.3 MHz, additional discharges are observed outside the inter-electrode gas gap. Because each high voltage electrode are inside a dielectric barrel, these additional discharges occur on the side of the barrel where the gap is larger. They disappear when the RF-DBD mode is attained in the 1 mm inter-electrode gas gap, i.e., for frequencies equal or higher than 3 MHz. Fast imaging and optical emission spectroscopy show that the additional discharges are radio-frequency DBDs while the inter-electrode discharge is a TDBD. The RF-DBD discharge mode is attained when electrons drift becomes low enough compared to the voltage oscillation frequency to limit electron loss at the anode. To check that the additional discharges are due to a larger gas gap and a lower voltage amplitude, the TDBD/RF-DBD transition is investigated as a function of the gas gap and the applied voltage frequency and amplitude. Results show that the increase in the frequency at constant gas gap or in the gas gap at constant frequency allows to obtain RF-DBD instead of TDBD. At low frequency and large gap, the increase in the applied voltage allows RF-DBD/TDBD transition. As a consequence, an electrode configuration allowing different gap values is a solution to successively have different discharge modes with the same applied voltage.

  11. RF-MEMS capacitive switches with high reliability

    Science.gov (United States)

    Goldsmith, Charles L.; Auciello, Orlando H.; Carlisle, John A.; Sampath, Suresh; Sumant, Anirudha V.; Carpick, Robert W.; Hwang, James; Mancini, Derrick C.; Gudeman, Chris

    2013-09-03

    A reliable long life RF-MEMS capacitive switch is provided with a dielectric layer comprising a "fast discharge diamond dielectric layer" and enabling rapid switch recovery, dielectric layer charging and discharging that is efficient and effective to enable RF-MEMS switch operation to greater than or equal to 100 billion cycles.

  12. Influence of an additional ballast volume on a pulsed ICP discharge

    International Nuclear Information System (INIS)

    Bogdanov, E A; Jr, C A DeJoseph; Demidov, V I; Kudryavtsev, A A; Serditov, K Yu

    2007-01-01

    A spatial and temporal numerical simulation has been carried out of a pulsed (100% modulated), rf inductively coupled plasma discharge in argon, connected to an additional (ballast) diffusion chamber of much larger volume. It is demonstrated that during the active phase, the presence of the large ballast volume has a small impact on the parameters of the plasma in the smaller discharge chamber. In this case the plasma parameters in the discharge chamber can be estimated separately from the diffusion chamber by a standard method using the characteristic ambipolar diffusion time (for example, using a global model). However, during the afterglow phase, the situation is changed significantly. In the afterglow, the densities of charged particles in the discharge chamber become lower than in the large ballast chamber due to more rapid diffusion loss. As a result, the reverse of the active phase situation occurs, namely, the plasma does not flow from the small to the large chamber, but in the opposite direction, from diffusive to discharge volume, and both the plasma density gradient and the self-consistent ambipolar electric field in the small chamber change directions. This phenomenon leads to new effects in the discharge volume, in particular a decreasing rate of decay of densities of charged particles and electron temperature. Thus, in the afterglow the presence of a large additional ballast volume has a significant impact on the plasma transport. In this case, a simple treatment of the plasma in the discharge chamber in the framework of a spatially averaged model (for example, the global model) is inadequate

  13. Laser induced fluorescence in atmospheric pressure discharges

    International Nuclear Information System (INIS)

    Dilecce, G; De Benedictis, S; Martini, L M; Tosi, P; Scotoni, M

    2015-01-01

    This paper offers an outline of laser induced fluorescence (LIF) diagnostics and practical recommendations for its use in atmospheric pressure discharges. LIF principles, technical requirements and rationalization of experimental outcomes by modelling are addressed. Important issues that are particularly relevant to small scale, spatially inhomogeneous discharges, like plasma-jets, are emphasized. For the first time, all collision processes and the spatial non-homogeneity of the laser beam are together accounted for in the LIF model. Saturation characteristics are discussed and used for the assessment of model parameters. A calibration procedure is discussed and implemented. Gas temperature measurements by LIF are also addressed. The whole description of the technique is given, without loss of generality, through the example of its application to the OH radical. Notes on other diatomic radicals, CH, NO and CN, are given along the paper. Some results in a RF plasma-jet are presented as an example of application in a discharge system where all the concepts developed in the paper are applied. (paper)

  14. Synthesis of sheath voltage drops in asymmetric radio-frequency discharges

    International Nuclear Information System (INIS)

    Yonemura, Shigeru; Nanbu, Kenichi; Iwata, Naoaki

    2004-01-01

    A sheath voltage drop in asymmetric discharges is one of the most important parameters of radio-frequency capacitively coupled plasmas because it determines the kinetic energy of the ions incident on the target or substrate. In this study, we developed a numerical simulation code to estimate the sheath voltage drops and, consequently, the self-bias voltage. We roughly approximated general asymmetric rf discharges to one-dimensional spherical ones. The results obtained by using our simulation code are consistent with measurements and Lieberman's theory

  15. Influence of Plasma Pressure Fluctuation on RF Wave Propagation

    International Nuclear Information System (INIS)

    Liu Zhiwei; Bao Weimin; Li Xiaoping; Liu Donglin; Zhou Hui

    2016-01-01

    Pressure fluctuations in the plasma sheath from spacecraft reentry affect radio-frequency (RF) wave propagation. The influence of these fluctuations on wave propagation and wave properties is studied using methods derived by synthesizing the compressible turbulent flow theory, plasma theory, and electromagnetic wave theory. We study these influences on wave propagation at GPS and Ka frequencies during typical reentry by adopting stratified modeling. We analyzed the variations in reflection and transmission properties induced by pressure fluctuations. Our results show that, at the GPS frequency, if the waves are not totally reflected then the pressure fluctuations can remarkably affect reflection, transmission, and absorption properties. In extreme situations, the fluctuations can even cause blackout. At the Ka frequency, the influences are obvious when the waves are not totally transmitted. The influences are more pronounced at the GPS frequency than at the Ka frequency. This suggests that the latter can mitigate blackout by reducing both the reflection and the absorption of waves, as well as the influences of plasma fluctuations on wave propagation. Given that communication links with the reentry vehicles are susceptible to plasma pressure fluctuations, the influences on link budgets should be taken into consideration. (paper)

  16. Fast, kinetically self-consistent simulation of RF modulated plasma boundary sheaths

    International Nuclear Information System (INIS)

    Shihab, Mohammed; Ziegler, Dennis; Brinkmann, Ralf Peter

    2012-01-01

    A mathematical model is presented which enables the efficient, kinetically self-consistent simulation of RF modulated plasma boundary sheaths in all technically relevant discharge regimes. It is defined on a one-dimensional geometry where a Cartesian x-axis points from the electrode or wall at x E ≡ 0 towards the plasma bulk. An arbitrary endpoint x B is chosen ‘deep in the bulk’. The model consists of a set of kinetic equations for the ions, Boltzmann's relation for the electrons and Poisson's equation for the electrical field. Boundary conditions specify the ion flux at x B and a periodically—not necessarily harmonically—modulated sheath voltage V(t) or sheath charge Q(t). The equations are solved in a statistical sense. However, it is not the well-known particle-in-cell (PIC) scheme that is employed, but an alternative iterative algorithm termed ensemble-in-spacetime (EST). The basis of the scheme is a discretization of the spacetime, the product of the domain [x E , x B ] and the RF period [0, T]. Three modules are called in a sequence. A Monte Carlo module calculates the trajectories of a large set of ions from their start at x B until they reach the electrode at x E , utilizing the potential values on the nodes of the spatio-temporal grid. A harmonic analysis module reconstructs the Fourier modes n im (x) of the ion density n i (x, t) from the calculated trajectories. A field module finally solves the Boltzmann-Poisson equation with the calculated ion densities to generate an updated set of potential values for the spatio-temporal grid. The iteration is started with the potential values of a self-consistent fluid model and terminates when the updates become sufficiently small, i.e. when self-consistency is achieved. A subsequent post-processing determines important quantities, in particular the phase-resolved and phase-averaged values of the ion energy and angular distributions and the total energy flux at the electrode. A drastic reduction of the

  17. Temperature and Nitric Oxide Generation in a Pulsed Arc Discharge Plasma

    International Nuclear Information System (INIS)

    Namihira, T.; Sakai, S.; Matsuda, M.; Wang, D.; Kiyan, T.; Akiyama, H.; Okamoto, K.; Toda, K.

    2007-01-01

    Nitric oxide (NO) is increasingly being used in medical treatments of high blood pressure, acute respiratory distress syndrome and other illnesses related to the lungs. Currently a NO inhalation system consists of a gas cylinder of N 2 mixed with a high concentration of NO. This arrangement is potentially risky due to the possibility of an accidental leak of NO from the cylinder. The presence of NO in the air leads to the formation of nitric dioxide (NO 2 ), which is toxic to the lungs. Therefore, an on-site generator of NO would be highly desirable for medical doctors to use with patients with lung disease. To develop the NO inhalation system without a gas cylinder, which would include a high concentration of NO, NAMIHIRA et al have recently reported on the production of NO from room air using a pulsed arc discharge. In the present work, the temperature of the pulsed arc discharge plasma used to generate NO was measured to optimize the discharge condition. The results of the temperature measurements showed the temperature of the pulsed arc discharge plasma reached about 10,000 K immediately after discharge initiation and gradually decreased over tens of microseconds. In addition, it was found that NO was formed in a discharge plasma having temperatures higher than 9,000 K and a smaller input energy into the discharge plasma generates NO more efficiently than a larger one

  18. Abrupt changes in neon discharge plasma detected via the optogalvanic effect

    Energy Technology Data Exchange (ETDEWEB)

    Han, Xianming L., E-mail: xhan@butler.edu [Dept. of Physics and Astronomy, Butler University, Indianapolis, IN 46208 (United States); Blosser, Michael C. [Dept. of Physics and Astronomy, Butler University, Indianapolis, IN 46208 (United States); Misra, Prabhakar [Dept. of Physics and Astronomy, Howard University, Washington DC 20059 (United States); Chandran, Haridass [Dept. of Physical Science, Belfry School, Belfry, KY 41514 (United States)

    2012-10-30

    When a laser is tuned between two excited energy levels of a gas in a Direct Current discharge lamp, the discharge current will experience a temporary disturbance lasting tens or hundreds of microseconds known as the optogalvanic effect. We have carried out extensive studies of optogalvanic effects in neon discharge plasmas for transitions at 621.7 nm, 630.5 nm, 638.3 nm, 650.7 nm and 659.9 nm. A nonlinear least-squares Monte Carlo technique has been used to determine the relevant amplitude coefficients, decay rates and the instrumental time constant. We discovered an abrupt change in the neon discharge plasma at a discharge current of about 6 mA.

  19. Laser pulse guiding and electron acceleration in the ablative capillary discharge plasma

    International Nuclear Information System (INIS)

    Kameshima, T.; Kotaki, H.; Kando, M.; Daito, I.; Kawase, K.; Fukuda, Y.; Homma, T.; Esirkepov, T. Zh.; Chen, L. M.; Kondo, S.; Bobrova, N. A.; Sasorov, P. V.; Bulanov, S. V.

    2009-01-01

    The results of experiments are presented for the laser electron acceleration in the ablative capillary discharge plasma. The plasma channel is formed by the discharge inside the ablative capillary. The intense short laser pulse is guided over a 4 cm length. The generated relativistic electrons show both the quasimonoenergetic and quasi-Maxwellian energy spectra, depending on laser and plasma parameters. The analysis of the inner walls of the capillaries that underwent several tens of shots shows that the wall deformation and blistering resulted from the discharge and laser pulse effects.

  20. Design of an RF Antenna for a Large-Bore, High Power, Steady State Plasma Processing Chamber for Material Separation

    International Nuclear Information System (INIS)

    Rasmussen, D.A.; Freeman, R.L.

    2001-01-01

    The purpose of this Cooperative Research and Development Agreement (CRADA) between UT-Battelle, LLC, (Contractor), and Archimedes Technology Group, (Participant) is to evaluate the design of an RF antenna for a large-bore, high power, steady state plasma processing chamber for material separation. Criteria for optimization will be to maximize the power deposition in the plasma while operating at acceptable voltages and currents in the antenna structure. The project objectives are to evaluate the design of an RF antenna for a large-bore, high power, steady state plasma processing chamber for material separation. Criteria for optimization will be to maximize the power deposition in the plasma while operating at acceptable voltages and currents in the antenna structure

  1. Plasma nanocoating of thiophene onto MoS{sub 2} nanotubes

    Energy Technology Data Exchange (ETDEWEB)

    Türkaslan, Banu Esencan [Suleyman Demirel University, Faculty of Engineering, Department of Chemical Engineering, 32260 Isparta (Turkey); Dikmen, Sibel [Suleyman Demirel University, Faculty of Arts and Science, Department of Chemistry, 32260 Isparta (Turkey); Öksüz, Lütfi [Suleyman Demirel University, Faculty of Arts and Science, Department of Physics, 32260 Isparta (Turkey); Öksüz, Aysegul Uygun, E-mail: ayseguluygun@sdu.edu.tr [Suleyman Demirel University, Faculty of Arts and Science, Department of Chemistry, 32260 Isparta (Turkey)

    2015-12-01

    Highlights: • MoS{sub 2} nanotubes were coated with thiophene by atmospheric pressure radio-frequency (RF) glow discharge. • Among nanohybrid preparation methods, the plasma methods appear as new technology. • The effect of plasma power on PTh/MoS{sub 2} nanocomposite properties has been investigated. • When the discharge power is increased between 117 and 360 W the chemical structure of PTh is not changed and the structure of nanocomposites become more uniformly. - Abstract: MoS{sub 2} nanotubes were coated with conductive polymer thiophene by atmospheric pressure radio-frequency (RF) glow discharge. MoS{sub 2} nanotubes were prepared by thermal decomposition of hexadecylamine (HDA) intercalated laminar MoS{sub 2} precursor on anodized aluminum oxide template and the thiophene was polymerized directly on surface of these nanotubes as in situ by plasma method. The effect of plasma power on PTh/MoS{sub 2} nanocomposite properties has been investigated by means of Fourier transform infrared spectroscopy (FTIR), scanning electron microscopy (SEM and EDX), and X-ray diffraction spectroscopy (XRD). The presence of PTh bands in the FTIR spectra of PTh/MoS{sub 2} nanotube nanocomposites corresponding XRD results indicates that the polythiophene coating onto MoS{sub 2} nanotube. The chemical structure of PTh is not changed when the plasma power of discharge differ from 117 to 360 W. SEM images of nanocomposites show that when the discharge power is increased between 117 and 360 W the average diameter of PTh/MoS{sub 2} nanotube nanocomposites are changed and the structure become more uniformly.

  2. Numerical simulation of the sustaining discharge in radio frequency hollow cathode discharge in argon

    Energy Technology Data Exchange (ETDEWEB)

    Jiang, Xin-Xian; He, Feng, E-mail: hefeng@bit.edu.cn; Ouyang, Ji-Ting [School of Physics, Beijing Institute of Technology, Beijing 100081 (China); Chen, Qiang, E-mail: lppmchenqiang@hotmail.com; Ge, Teng [Laboratory of Plasma Physics and Materials, Beijing Institute of Graphic Communication, Beijing 10081 (China)

    2014-03-15

    In this paper, a two-dimensional fluid model was developed to study the radio frequency (RF) hollow cathode discharge (HCD) in argon at 1 Torr. The evolutions of the particle density distribution and the ionization rate distribution in RF HCD at 13.56 MHz indicate that the discharge mainly occurs inside the hollow cathode. The spatio-temporal distributions of the ionization rate and the power deposition within the hollow cathode imply that sheath oscillation heating is the primary mechanism to sustain the RF HCD, whereas secondary electron emission plays a negligible role. However, as driving frequency decreases, secondary electron heating becomes a dominant mechanism to sustain the discharge in RF hollow cathode.

  3. Measurements of time average series resonance effect in capacitively coupled radio frequency discharge plasma

    International Nuclear Information System (INIS)

    Bora, B.; Bhuyan, H.; Favre, M.; Wyndham, E.; Chuaqui, H.; Kakati, M.

    2011-01-01

    Self-excited plasma series resonance is observed in low pressure capacitvely coupled radio frequency discharges as high-frequency oscillations superimposed on the normal radio frequency current. This high-frequency contribution to the radio frequency current is generated by a series resonance between the capacitive sheath and the inductive and resistive bulk plasma. In this report, we present an experimental method to measure the plasma series resonance in a capacitively coupled radio frequency argon plasma by modifying the homogeneous discharge model. The homogeneous discharge model is modified by introducing a correction factor to the plasma resistance. Plasma parameters are also calculated by considering the plasma series resonances effect. Experimental measurements show that the self-excitation of the plasma series resonance, which arises in capacitive discharge due to the nonlinear interaction of plasma bulk and sheath, significantly enhances both the Ohmic and stochastic heating. The experimentally measured total dissipation, which is the sum of the Ohmic and stochastic heating, is found to increase significantly with decreasing pressure.

  4. Transmission line theory for long plasma production by radio frequency discharges between parallel-plate electrodes

    International Nuclear Information System (INIS)

    Nonaka, S.

    1991-01-01

    In order to seek for a radio frequency (RF) eigen-mode of waves in producing a plasma between a pair of long dielectric-covered parallel-plate RF electrodes, this paper analyzed all normal modes propagating along the electrodes by solving Maxwell's equations. The result showed that only an odd surface wave mode will produce the plasma in usual experimental conditions, which will become a basic transmission line theory when use of such long electrodes for on-line mass-production of amorphous silicon solar cells

  5. The effect of ethanol gas impurity on the discharge mode and discharge products of argon plasma jet at atmospheric pressure

    Science.gov (United States)

    Xia, Wenjie; Liu, Dingxin; Xu, Han; Wang, Xiaohua; Liu, Zhijie; Rong, Mingzhe; Kong, Michael G.

    2018-05-01

    Argon is a widely used working gas of plasmas, which is much cheaper than helium but on the other hand much more difficult to generate diffuse discharge at atmospheric pressure. In order to meet the application requirements, plenty of researches have been reported to facilitate the diffuse discharge happening for argon plasmas, and in this paper an approach of using ethanol gas (EtOH) impurity is investigated. The discharge characteristics of Ar + EtOH plasma jet are studied as a function of the applied voltage and the concentration of EtOH, from which the concentration of EtOH between ∼200 and ∼3300 parts per million (ppm) is determined necessary for the generation of diffuse discharge. Compared with the helium plasma jet in literature, it is deduced that the diffuse discharge is probably caused by the Penning ionization happening between the metastable argon and EtOH. The discharge products of Ar + EtOH (672 ppm) plasma jet are measured and the corresponding chemistry pathways are analyzed. About 20% of EtOH is decomposed via complex chemical reactions to form more than a dozen of neutral species, such as CH3CHO, CH3COOH, CO, H2O, and C n H2n+2 (n ≥ 3), and various kinds of ionic species, including C+, CH+, ArH+, {{{{O}}}2}-, CH3CH2O‑, etc.

  6. Very low frequency oscillations of heat load and recycling flux in steady-state tokamak discharge in TRIAM-1M

    International Nuclear Information System (INIS)

    Zushi, H.; Sakamoto, M.; Hanada, K.; Iyomasa, A.; Nakamura, K.; Sato, K.N.; Idei, H.; Kawasaki, S.; Nakashima, H.; Higashijima, A.; Hasegawa, M.; Matsuo, Y.; Kuramoto, K.; Sugata, T.; Maezono, N.; Hoshika, H.; Sasaki, K.

    2004-01-01

    Plasma wall interaction (PWI) driven relaxation oscillations are investigated in the steady state discharge for 5 hours. The oscillation frequency was about 10 -3 Hz and each perturbation lasted for about 300 s. The heat load, recycling flux and impurity influx were varied from a few % to several tens of %. The largest variation of 70% was seen on the Mo XIII (molybdenum), although the influx of Mo I was only 20 %. Although the input rf power is kept constant during the discharge, the coupling between the rf and plasma was increased by about 10%. The current drive efficiency is decreased by 24 % in spite of current ramp. The toroidal and poloidal profiles of the recycling flux were also changed. During the last relaxation phase, the plasma was finally terminated. The current reduction (> 4 kA) was not recovered by intense local perturbation of the recycling superposed on the relaxation oscillation. (authors)

  7. A High-Intensity, RF Plasma-Sputter Negative Ion Source

    International Nuclear Information System (INIS)

    Alton, G.D.; Bao, Y.; Cui, B.; Lohwasser, R.; Reed, C.A.; Zhang, T.

    1999-01-01

    A high-intensity, plasma-sputter negative-ion source based on the use of RF power for plasma generation has been developed that can be operated in either pulsed or dc modes. The source utilizes a high-Q, self-igniting, inductively coupled antenna system, operating at 80 MHz that has been optimized to generate Cs-seeded plasmas at low pressures (typically, - (610 microA); F - (100 microA); Si - (500 microA); S - (500 microA); P - (125 microA); Cl - (200 microA); Ni - (150 microA); Cu - (230 microA); Ge - (125 microA); As - (100 microA); Se - (200 microA); Ag - (70 microA); Pt - (125 microA); Au - (250 microA). The normalized emittance var e psilon n of the source at the 80% contour is: var e psilon n = 7.5 mm.mrad.(MeV) 1/2 . The design principles of the source, operational parameters, ion optics, emittance and intensities for a number of negative-ion species will be presented in this report

  8. Rf-plasma synthesis of nanosize silicon carbide and nitride. Final report

    Energy Technology Data Exchange (ETDEWEB)

    Buss, R.J.

    1997-02-01

    A pulsed rf plasma technique is capable of generating ceramic particles of 10 manometer dimension. Experiments using silane/ammonia and trimethylchlorosilane/hydrogen gas mixtures show that both silicon nitride and silicon carbide powders can be synthesized with control of the average particle diameter from 7 to 200 nm. Large size dispersion and much agglomeration appear characteristic of the method, in contrast to results reported by another research group. The as produced powders have a high hydrogen content and are air and moisture sensitive. Post-plasma treatment in a controlled atmosphere at elevated temperature (800{degrees}C) eliminates the hydrogen and stabilizes the powder with respect to oxidation or hydrolysis.

  9. A flowing plasma model to describe drift waves in a cylindrical helicon discharge

    International Nuclear Information System (INIS)

    Chang, L.; Hole, M. J.; Corr, C. S.

    2011-01-01

    A two-fluid model developed originally to describe wave oscillations in the vacuum arc centrifuge, a cylindrical, rapidly rotating, low temperature, and confined plasma column, is applied to interpret plasma oscillations in a RF generated linear magnetized plasma [WOMBAT (waves on magnetized beams and turbulence)], with similar density and field strength. Compared to typical centrifuge plasmas, WOMBAT plasmas have slower normalized rotation frequency, lower temperature, and lower axial velocity. Despite these differences, the two-fluid model provides a consistent description of the WOMBAT plasma configuration and yields qualitative agreement between measured and predicted wave oscillation frequencies with axial field strength. In addition, the radial profile of the density perturbation predicted by this model is consistent with the data. Parameter scans show that the dispersion curve is sensitive to the axial field strength and the electron temperature, and the dependence of oscillation frequency with electron temperature matches the experiment. These results consolidate earlier claims that the density and floating potential oscillations are a resistive drift mode, driven by the density gradient. To our knowledge, this is the first detailed physics model of flowing plasmas in the diffusion region away from the RF source. Possible extensions to the model, including temperature nonuniformity and magnetic field oscillations, are also discussed.

  10. Low frequency RF heating of plasmas in a toroidal stellarator

    International Nuclear Information System (INIS)

    Golovato, S.N.

    1977-01-01

    Studies of transit-time magnetic pumping and Alfven wave heating have been done in the Proto-Cleo stellarator. Both plasma heating and plasma confinement have been investigated. A traveling wave was launched around the Proto-Cleo l = 2, 6 field period stellarator to attempt transit-time magnetic pumping of a pulsed electron beam moving along the magnetic field lines. An apparent loss of the beam was seen when the transit-time magnetic pumping was applied. A random walk diffusion of the beam electrons with a step size determined by the radial EXB drift due to the poloidal electric field agrees well with the experimental results. Alfven wave heating was applied to plasmas in the Proto-Cleo l = 3, 7 field period stellarator. Global excitation of Alfven waves was accomplished by exciting an electrostatically shielded helical winding corresponding to a q = 3 rational field line with a pulsed, high-power RF source. Theoretical analysis of this helical wave launcher predicted effective energy absorption in the Proto-Cleo gun-produced plasma

  11. Conversion from carbon dioxide to organic materials by RF impulse discharges with hydrogen

    Energy Technology Data Exchange (ETDEWEB)

    Satoh, G.; Kano, M.; Iizuka, S. [Tohoku Univ., Sendai (Japan). Dept. of Electrical Engineering

    2010-07-01

    Carbon dioxide (CO{sub 2}) is among the most serious greenhouse gases emitted from the burning of fossil fuels. The objective of this study was to investigate the fundamental process of reducing CO{sub 2} to generate beneficial and reusable organic materials like methane (CH{sub 4}) and alcohol (CH{sub 3}OH) by using RF impulse discharges in a low gas pressure regime. A low-pressure glow discharge was used to investigate the fundamental processes without catalysts. The discharge took place inside a glass tube by changing the discharge parameters such as voltage, gas flow rate and gas residence time, where the CO{sub 2} was reduced by hydrogen (H{sub 2}). Fourier transform infrared spectroscopy (FTIR) was used to analyze the gas species. Several organic materials were observed, including methane and methanol. The study focused primarily on the reduction of CO{sub 2} by using only H{sub 2}. Carbon monoxide (CO) was clearly a major product from CO{sub 2}, but CH{sub 4} was the most dominant organic species in this experiment. The density of CH{sub 4} increased with the discharge power, and eventually its volume ratio was about 20 percent among the gas species containing carbon via decomposition of CO{sub 2}. This ratio was dependent on the mixing ratio of CO{sub 2} and H{sub 2}. It was concluded that the total pressure is an important factor for efficient production. CH{sub 3}OH formation was observed, but its concentration was low in comparison to CH{sub 4}. 5 refs., 6 figs.

  12. Linear electromagnetic excitation of an asymmetric low pressure capacitive discharge with unequal sheath widths

    Energy Technology Data Exchange (ETDEWEB)

    Lieberman, M. A., E-mail: lieber@eecs.berkeley.edu; Lichtenberg, A. J.; Kawamura, E. [Department of Electrical Engineering and Computer Science, University of California, Berkeley, California 94720-1770 (United States); Chabert, P. [Laboratoire de Physique des Plasmas, CNRS, Ecole Polytechnique, UPMC, Paris XI, Observatoire de Paris, 91128 Palaiseau (France)

    2016-01-15

    It is well-known that standing waves having radially center-high radio frequency (rf) voltage profiles exist in high frequency capacitive discharges. In this work, we determine the symmetric and antisymmetric radially propagating waves in a cylindrical capacitive discharge that is asymmetrically driven at the lower electrode by an rf voltage source. The discharge is modeled as a uniform bulk plasma which at lower frequencies has a thicker sheath at the smaller area powered electrode and a thinner sheath at the larger area grounded electrode. These are self-consistently determined at a specified density using the Child law to calculate sheath widths and the electron power balance to calculate the rf voltage. The fields and the system resonant frequencies are determined. The center-to-edge voltage ratio on the powered electrode is calculated versus frequency, and central highs are found near the resonances. The results are compared with simulations in a similar geometry using a two-dimensional hybrid fluid-analytical code, giving mainly a reasonable agreement. The analytic model may be useful for finding good operating frequencies for a given discharge geometry and power.

  13. Numerical study on discharge process of microcavity plasma

    International Nuclear Information System (INIS)

    Xia Guangqing; Xue Weihua; Wang Dongxue; Zhu Guoqiang; Zhu Yu

    2012-01-01

    The evolution of plasma parameters during high pressure discharge in the microcavity with a hollow anode was numerically studied, with a two-dimensional self-consistent fluid model. The simulations were performed with argon at 13.3 kPa. The numerical results show that during the discharge the electric field around the cathode transforms from an axial field to a radial field, the plasma density gets the maximum value on the central line of the cavity and the location of the maximum density moves from the region near anode at the initial stage to the cathode vicinity at the stable stage, and the maximum electron temperature occurs in the ring sheath of cathode. (authors)

  14. Negative ion mass spectra and particulate formation in rf silane plasma deposition experiments

    International Nuclear Information System (INIS)

    Howling, A.A.; Dorier, J.L.; Hollenstein, C.

    1992-09-01

    Negative ions have been clearly identified in silane rf plasmas used for the deposition of amorphous silicon. Mass spectra were measured for monosilicon up to pentasilicon negative ion radical groups in power-modulated plasmas by means of a mass spectrometer mounted just outside the glow region. Negative ions were only observed over a limited range of power modulation frequency which corresponds to particle-free conditions. The importance of negative ions regarding particulate formation is demonstrated and commented upon. (author) 3 figs., 19 refs

  15. Direct synthesis of nano-sized glass powders with spherical shape by RF (radio frequency) thermal plasma

    International Nuclear Information System (INIS)

    Seo, J.H.; Kim, J.S.; Lee, M.Y.; Ju, W.T.; Nam, I.T.

    2011-01-01

    A new route for obtaining very small, spheroid glass powders is demonstrated using an RF (radio frequency) thermal plasma system. During the process, four kinds of chemicals, here SiO 2 , B 2 O 3 , BaCO 3 , and K 2 CO 3 , were mixed at pre-set weight ratios, spray-dried, calcined at 250 deg. C for 3 h, and crushed into fragments. Then, they were successfully reformed into nano-sized amorphous powders (< 200 nm) with spherical shape by injecting them along the centerline of an RF thermal plasma reactor at ∼ 24 kW. The as-synthesized powders show negligible (< 1%) composition changes when compared with the injected precursors of raw material compounds.

  16. Radiofrequency cold plasma nitrided carbon steel: Microstructural and micromechanical characterizations

    International Nuclear Information System (INIS)

    Bouanis, F.Z.; Bentiss, F.; Bellayer, S.; Vogt, J.B.; Jama, C.

    2011-01-01

    Highlights: → C38 carbon steel samples were plasma nitrided using a radiofrequency (rf) nitrogen plasma discharge. → RF plasma treatment enables nitriding for non-heated substrates. → The morphological and chemical analyses show the formation of a uniform thickness on the surface of the nitrided C38 steel. → Nitrogen plasma active species diffuse into the samples and lead to the formation of Fe x N. → The increase in microhardness values for nitrided samples with plasma processing time is interpreted by the formation of a thicker nitrided layer on the steel surface. - Abstract: In this work, C38 carbon steel was plasma nitrided using a radiofrequency (rf) nitrogen plasma discharge on non-heated substrates. General characterizations were performed to compare the chemical compositions, the microstructures and hardness of the untreated and plasma treated surfaces. The plasma nitriding was carried out on non-heated substrates at a pressure of 16.8 Pa, using N 2 gas. Surface characterizations before and after N 2 plasma treatment were performed by means of the electron probe microanalysis (EPMA), X-ray photoelectron spectroscopy (XPS) and Vickers microhardness measurements. The morphological and chemical analysis showed the formation of a uniform structure on the surface of the nitrided sample with enrichment in nitrogen when compared to untreated sample. The thickness of the nitride layer formed depends on the treatment time duration and is approximately 14 μm for 10 h of plasma treatment. XPS was employed to obtain chemical-state information of the plasma nitrided steel surfaces. The micromechanical results show that the surface microhardness increases as the plasma-processing time increases to reach, 1487 HV 0.005 at a plasma processing time of 8 h.

  17. Radiofrequency cold plasma nitrided carbon steel: Microstructural and micromechanical characterizations

    Energy Technology Data Exchange (ETDEWEB)

    Bouanis, F.Z. [Universite Lille Nord de France, F-59000 Lille (France); Unite Materiaux et Transformations (UMET), Ingenierie des Systemes Polymeres, CNRS UMR 8207, ENSCL, BP 90108, F-59652 Villeneuve d' Ascq Cedex (France); Bentiss, F. [Laboratoire de Chimie de Coordination et d' Analytique, Faculte des Sciences, Universite Chouaib Doukkali, B.P. 20, M-24000 El Jadida (Morocco); Bellayer, S.; Vogt, J.B. [Universite Lille Nord de France, F-59000 Lille (France); Unite Materiaux et Transformations (UMET), Ingenierie des Systemes Polymeres, CNRS UMR 8207, ENSCL, BP 90108, F-59652 Villeneuve d' Ascq Cedex (France); Jama, C., E-mail: charafeddine.jama@ensc-lille.fr [Universite Lille Nord de France, F-59000 Lille (France); Unite Materiaux et Transformations (UMET), Ingenierie des Systemes Polymeres, CNRS UMR 8207, ENSCL, BP 90108, F-59652 Villeneuve d' Ascq Cedex (France)

    2011-05-16

    Highlights: {yields} C38 carbon steel samples were plasma nitrided using a radiofrequency (rf) nitrogen plasma discharge. {yields} RF plasma treatment enables nitriding for non-heated substrates. {yields} The morphological and chemical analyses show the formation of a uniform thickness on the surface of the nitrided C38 steel. {yields} Nitrogen plasma active species diffuse into the samples and lead to the formation of Fe{sub x}N. {yields} The increase in microhardness values for nitrided samples with plasma processing time is interpreted by the formation of a thicker nitrided layer on the steel surface. - Abstract: In this work, C38 carbon steel was plasma nitrided using a radiofrequency (rf) nitrogen plasma discharge on non-heated substrates. General characterizations were performed to compare the chemical compositions, the microstructures and hardness of the untreated and plasma treated surfaces. The plasma nitriding was carried out on non-heated substrates at a pressure of 16.8 Pa, using N{sub 2} gas. Surface characterizations before and after N{sub 2} plasma treatment were performed by means of the electron probe microanalysis (EPMA), X-ray photoelectron spectroscopy (XPS) and Vickers microhardness measurements. The morphological and chemical analysis showed the formation of a uniform structure on the surface of the nitrided sample with enrichment in nitrogen when compared to untreated sample. The thickness of the nitride layer formed depends on the treatment time duration and is approximately 14 {mu}m for 10 h of plasma treatment. XPS was employed to obtain chemical-state information of the plasma nitrided steel surfaces. The micromechanical results show that the surface microhardness increases as the plasma-processing time increases to reach, 1487 HV{sub 0.005} at a plasma processing time of 8 h.

  18. Effect of Electric Discharge on Properties of Nano-Particulate Catalyst for Plasma-Catalysis.

    Science.gov (United States)

    Lee, Chung Jun; Kim, Jip; Kim, Taegyu

    2016-02-01

    Heterogeneous catalytic processes have been used to produce hydrogen from hydrocarbons. However, high reforming temperature caused serious catalyst deteriorations and low energy efficiency. Recently, a plasma-catalyst hybrid process was used to reduce the reforming temperature and to improve the stability and durability of reforming catalysts. Effect of electric discharges on properties of nanoparticulate catalysts for plasma-catalysis was investigated in the present study. Catalyst-bed porosity was varied by packing catalyst beads with the different size in a reactor. Discharge power and onset voltage of the plasma were measured as the catalyst-bed porosity was varied. The effect of discharge voltage, frequency and voltage waveforms such as the sine, pulse and square was investigated. We found that the optimal porosity of the catalyst-bed exists to maximize the electric discharge. At a low porosity, the electric discharge was unstable to be sustained because the space between catalysts got narrow nearly close to the sheath region. On the other hand, at a high porosity, the electric discharge became weak because the plasma was not sufficient to interact with the surface of catalysts. The discharge power increased as the discharge voltage and frequency increased. The square waveform was more efficient than the sine and pulse one. At a high porosity, however, the effect of the voltage waveform was not considerable because the space between catalysts was too large for plasma to interact with the surface of catalysts.

  19. Narrow gap electronegative capacitive discharges

    Energy Technology Data Exchange (ETDEWEB)

    Kawamura, E.; Lieberman, M. A.; Lichtenberg, A. J. [Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720 (United States)

    2013-10-15

    Narrow gap electronegative (EN) capacitive discharges are widely used in industry and have unique features not found in conventional discharges. In this paper, plasma parameters are determined over a range of decreasing gap length L from values for which an electropositive (EP) edge exists (2-region case) to smaller L-values for which the EN region connects directly to the sheath (1-region case). Parametric studies are performed at applied voltage V{sub rf}=500 V for pressures of 10, 25, 50, and 100 mTorr, and additionally at 50 mTorr for 1000 and 2000 V. Numerical results are given for a parallel plate oxygen discharge using a planar 1D3v (1 spatial dimension, 3 velocity components) particle-in-cell (PIC) code. New interesting phenomena are found for the case in which an EP edge does not exist. This 1-region case has not previously been investigated in detail, either numerically or analytically. In particular, attachment in the sheaths is important, and the central electron density n{sub e0} is depressed below the density n{sub esh} at the sheath edge. The sheath oscillations also extend into the EN core, creating an edge region lying within the sheath and not characterized by the standard diffusion in an EN plasma. An analytical model is developed using minimal inputs from the PIC results, and compared to the PIC results for a base case at V{sub rf}=500 V and 50 mTorr, showing good agreement. Selected comparisons are made at the other voltages and pressures. A self-consistent model is also developed and compared to the PIC results, giving reasonable agreement.

  20. Radio Frequency Plasma Discharge Lamps for Use as Stable Calibration Light Sources

    Science.gov (United States)

    McAndrew, Brendan; Cooper, John; Arecchi, Angelo; McKee, Greg; Durell, Christopher

    2012-01-01

    Stable high radiance in visible and near-ultraviolet wavelengths is desirable for radiometric calibration sources. In this work, newly available electrodeless radio-frequency (RF) driven plasma light sources were combined with research grade, low-noise power supplies and coupled to an integrating sphere to produce a uniform radiance source. The stock light sources consist of a 28 VDC power supply, RF driver, and a resonant RF cavity. The RF cavity includes a small bulb with a fill gas that is ionized by the electric field and emits light. This assembly is known as the emitter. The RF driver supplies a source of RF energy to the emitter. In commercial form, embedded electronics within the RF driver perform a continual optimization routine to maximize energy transfer to the emitter. This optimization routine continually varies the light output sinusoidally by approximately 2% over a several-second period. Modifying to eliminate this optimization eliminates the sinusoidal variation but allows the output to slowly drift over time. This drift can be minimized by allowing sufficient warm-up time to achieve thermal equilibrium. It was also found that supplying the RF driver with a low-noise source of DC electrical power improves the stability of the lamp output. Finally, coupling the light into an integrating sphere reduces the effect of spatial fluctuations, and decreases noise at the output port of the sphere.

  1. Characterization of the plasma in magnetic multidipole discharges

    International Nuclear Information System (INIS)

    Ferreira, J.G.

    1988-09-01

    In this work, a caracterization of the discharge of the quiescent plasma machine of INPE, and an identification of the most relevant processes in the definition of its plasma properties, were achieved. Measurements of plasma potential, the floating potential, the temperature of the electrons, and the density of the plasma, for pressures ranging from 10 -3 to 10 -1 Pa and for discharge potentials for 45V to 120V were acomplished. These measurements were made with a Langmuir spherical probe with 1mm in diameter. In the whole range of operation the presence of two populations of electrons with distinct temperatures in the energy range from 1 to 10eV was observed, although for pressures approaching 10 -1 Pa the plasma tended to a single population of electrons with temperature of 1eV. The difference between plasma and floating potentials was observed to become smaller as the pressure raised, and the potential difference between plasma and anode reached a value around 2V when pressure raised above 10 -2 Pa. The plasma density increases approximately linearly with pressure, for values below 10 -2 Paa, but above 10 -1 Pa its increase with pressure is quite reduced. A study on the collision processes in the plasma volume and on loss processes to surfaces allowed to interpret qualitatively the observed plasma behavior and to estimate, by means of simple expressions, some of the plasma parameters. The loss areas for ions and primary electrons were estimated from experimental results. A simple quantitative model which allows the calculation of plasma density in the whole range of operation, reproduced the correct order of magnitude of experimental values. However, an additional work, both theoretical and experimental, is required to obtain better agreement between experimental and theoretical values. (author) [pt

  2. Measurements and Simulations of Surface Dielectric Barrier Discharges Used as Plasma Actuators

    Science.gov (United States)

    Hoskinson, Alan R.

    2012-01-01

    This report is a Ph.D. dissertation performed under NRA cooperative agreement and submitted as part of the final report. Asymmetric surface dielectric barrier discharges (DBDs) have shown promise for use as aerodynamic actuators for active flow control. In this project we studied DBD actuators experimentally and numerically. Our DBDs used a symmetric triangular high voltage waveform to generate plasma in atmospheric pressure air. Time-averaged measurements indicated that the induced force of a single barrier actuator design (one electrode insulated from the plasma) can be increased exponentially above the results of previous studies by decreasing both the length and thickness of the electrode exposed to the plasma. This increased force may allow these devices to control flow separation in a wider range of flow environments. Experiments using an intensified digital camera to examine the plasma on time scales of a few nanoseconds showed that, in addition to the previously-observed filamentary and jet-like plasma structures, discharges with very thin exposed electrodes exhibited a weak but constant plasma immediately adjacent to those electrodes. In double-barrier actuators (both electrodes insulated), decreasing the diameter of the narrower electrode lead to increasing forces, and recorded images showed the simultaneous existence of both filamentary and jet-like plasma structures. The development and application of a time-dependent, two-dimensional computational fluid plasma model has aided in understanding the detailed physics of surface DBDs at all-time scales. For simulated single-barrier discharges, the model qualitatively reproduced the filamentary and jet-like micro-discharge structures. The model was somewhat successful in reproducing the observed characteristics of double-barrier actuators. For both actuator geometries, the model indicated that the majority of the forces induced on the neutral gas occur in between micro-discharges as the plasmas decay.

  3. Electric discharge plasmas influence attachment of cultured CHO k1 cells

    NARCIS (Netherlands)

    Kieft, I.E.; Broers, J.L.V.; Caubet-Hilloutou, V.; Slaaf, D.W.; Ramaekers, F.C.S.; Stoffels - Adamowicz, E.

    2004-01-01

    Non-thermal plasmas can be generated by electric discharges in gases. These plasmas are reactive media, capable of superficial treatment of various materials. A novel non-thermal atmospheric plasma source (plasma needle) has been developed and tested. Plasma appears at the end of a metal pin as a

  4. Magnetized whirls in plasma focus discharges

    International Nuclear Information System (INIS)

    Witalis, E.

    1979-05-01

    The plasma focus is briefly described with emphasis on its capabilities as a neutron source. The filamentary whirl structures observed in the discharge plasma are described. Starting with a simple, early and particularly well established case of vorticity imparted by a rotational electric field to the plasma in MHD generators, a general derivation is then outlined proving that such magnetically induced rotation is a general feature for the normally Hall-conducting magnetized plasma. Physical interpretations of the effect are given and objections to it are critically reviewed as is also a theory proposing radiation cooling as the cause of plasma filamentation. A more detailed derivation based essentially on the consistent description of the motion and the field generation of the charged plasma particles yields a theoretical model where the specific features of magnetically compressed plasmas are found. In particular, the ion collisionless skin depth is obtained as the key length parameter. This length is identified as roughly the whirl radius. In conjunction with a generalized Bennett relation theoretical whirl properties are predicted and found to agree with observations. Mechanisms that relate the whirls to nuclear fusion reaction conditions are tentatively indicated. (author)

  5. Radio frequency discharge with dust particles

    NARCIS (Netherlands)

    Chutov, Y. I.; W. J. Goedheer,; Kravchenko, O. Y.; Zuz, V. M.; Yan, M.; Martins, R.; Ferreira, I.; Fortunato, E.; Kroesen, G.

    2000-01-01

    A 1D PIC/MCC method has been developed for computer simulations of low-pressure RF discharges with dust particles using the method for dust-free discharges. A RF discharge in argon with dust particles distributed uniformly in the interelectrode gap is simulated at parameters providing a possibility

  6. Studies of RF sheaths and diagnostics on IShTAR

    Energy Technology Data Exchange (ETDEWEB)

    Crombé, K., E-mail: Kristel.Crombe@UGent.be [Department of Applied Physics, Ghent University, Ghent (Belgium); LPP-ERM/KMS, Royal Military Academy, Brussels (Belgium); Devaux, S.; Faudot, E.; Heuraux, S.; Moritz, J. [YIJL, UMR7198 CNRS-Université de Lorraine, Nancy (France); D’Inca, R.; Faugel, H.; Fünfgelder, H.; Jacquot, J.; Ochoukov, R. [Max-Planck-Institut für Plasmaphysik, Garching (Germany); Louche, F.; Tripsky, M.; Van Eester, D.; Wauters, T. [LPP-ERM/KMS, Royal Military Academy, Brussels (Belgium); Noterdaeme, J.-M. [Department of Applied Physics, Ghent University, Ghent (Belgium); Max-Planck-Institut für Plasmaphysik, Garching (Germany)

    2015-12-10

    IShTAR (Ion cyclotron Sheath Test ARrangement) is a linear magnetised plasma test facility for RF sheaths studies at the Max-Planck-Institut für Plasmaphysik in Garching. In contrast to a tokamak, a test stand provides more liberty to impose the parameters and gives better access for the instrumentation and antennas. The project will support the development of diagnostic methods for characterising RF sheaths and validate and improve theoretical predictions. The cylindrical vacuum vessel has a diameter of 1 m and is 1.1 m long. The plasma is created by an external cylindrical plasma source equipped with a helical antenna that has been designed to excite the m=1 helicon mode. In inductive mode, plasma densities and electron temperatures have been characterised with a planar Langmuir probe as a function of gas pressure and input RF power. A 2D array of RF compensated Langmuir probes and a spectrometer are planned. A single strap RF antenna has been designed; the plasma-facing surface is aligned to the cylindrical plasma to ease the modelling. The probes will allow direct measurements of plasma density profiles in front of the RF antenna, and thus a detailed study of the density modifications induced by RF sheaths, which influences the coupling. The RF antenna frequency has been chosen to study different plasma wave interactions: the accessible plasma density range includes an evanescent and propagative behaviour of slow or fast waves, and allows the study of the effect of the lower hybrid resonance layer.

  7. Progress of the ''batman'' RF source for negative hydrogen ions

    International Nuclear Information System (INIS)

    Frank, P.; Heinemann, B.; Kraus, W.; Probst, F.; Speth, E.; Vollmer, O.; Bucalossi, J.; Trainham, R.

    1998-01-01

    The aim of a collaboration between CEA Cadarache and IPP Garching is to investigate the ability of an rf source to produce negative-ion current densities compatible with ITER NBI requirements (20 mA/cm 2 D-). A standard PlNI-size rf source developed for ASDEX-Upgrade and a three-grid extraction system form the basis of BATMAN (Bavarian Test Machine for Negative Ions). In the case of a pure hydrogen plasma a current density of 5.5 mA/cm 2 at elevated pressure (2.4 Pa) can be reached. Adding small amounts of argon ( 2 . In the low pressure range (0.7 Pa) the negative ion yield is strongly reduced, but with an admixture of argon and a cesium injection the current density is higher approx. by a factor 8 (4 mA/cm 2 ) compared to the pure hydrogen discharge. The negative ion yield shows a saturation with increasing rf power. (author)

  8. Dynamic behavior of polydisperse dust system in cryogenic gas discharge complex plasmas

    NARCIS (Netherlands)

    Antipov, S.N.; Schepers, L.P.T.; Vasiliev, M.M.; Petrov, O.F.

    2016-01-01

    Complex (dusty) plasmas of micron-sized CeO2 polydisperse particles in dc glow discharges at 77 and ∼ 10 K were experimentally investigated. It was obtained that dust structure in cryogenic gas discharge plasma can be a mixture of two fractions (components) with completely different dust ordering

  9. Research of plasma-electrolyte discharge in the processes of obtaining metallic powders

    Science.gov (United States)

    Kashapov, R. N.; Kashapov, L. N.; Kashapov, N. F.

    2017-11-01

    The use of the plasma electrolyte process has never been considered as a simple, cheap and fast method of obtaining powders used in selective laser melting processes. Therefore, the adaptation of the plasma-electrolyte process to the production of metal powders used in additive production is an urgent task. The paper presents the results of studies of gas discharge parameters between a metal and liquid electrode in the processes of obtaining metallic iron powders. The discharge combustion conditions necessary for the formation of metal powders of micron size are determined. A possible mechanism for the formation of powder particles in a discharge plasma is proposed.

  10. The formation of metallic plasmas in transient capillary discharges at high current

    International Nuclear Information System (INIS)

    Wyndham, E S; Favre, M; Aliaga-Rossel, R

    2006-01-01

    We report observations of the formation of a metallic plasma in a high aspect ratio z-pinch confined within a ceramic capillary. A series of experiments on different capillary geometries was undertaken in which titanium metal rings were used to promote the formation of a titanium plasma through preferential ablation. In an initial vacuum a titanium seed plasma is formed in the hollow cathode (HC) volume by a low energy laser spark. This pre-ionizing plasma is assisted in its expansion into the z-pinch volume by the electron beams generated by a pre-ionizing discharge in the capillary, due to the HC effect. Further intense e-beam activity occurs on applying the main driver current to the capillary electrodes before the discharge impedance abruptly drops to give rise to an ensuing high current z-pinch. A segmented titanium ring structure within the capillary promotes metal ablation. The discharges are performed in tubes of 60 to 110 mm length and 3 and 5 mm effective internal diameter. The main discharge current is provided from a small pulsed power switched coaxial line, at up to 150 kA. The generator may be configured to deliver two different rates of current rise and this is found to have a significant effect on the plasma dynamics. The plasma properties are obtained from observations of the axial x-ray emission. The diagnostics used are filtered Si diodes, filtered time-resolved multi-pinhole camera images and the time resolved soft x-ray spectrum from 3 to 20 nm. While a single species metal plasma is not obtained, a very significant proportion of Ti is achieved in the higher rate of current rise configuration. The fraction of Ti diminishes for the longest length discharges and for the larger diameter tube diameter, as does the observed z-pinch uniformity. There is a weak dependance of the electron temperature with tube geometry, but the plasma density falls substantially in the longer discharges. This coincides with diminished effectiveness of the transient HC

  11. Discharge plasmas as EUV Sources for Future Micro Lithography

    Science.gov (United States)

    Kruecken, Thomas

    2007-08-01

    Future extreme ultraviolet (EUV) lithography will require very high radiation intensities in a narrow wavelength range around 13.5 nm, which is most efficiently emitted as line radiation by highly ionized heavy particles. Currently the most intense EUV sources are based on xenon or tin gas discharges. After having investigated the limits of a hollow cathode triggered xenon pinch discharge Philips Extreme UV favors a laser triggered tin vacuum spark discharge. Plasma and radiation properties of these highly transient discharges will be compared. Besides simple MHD-models the ADAS software package has been used to generate important atomic and spectral data of the relevant ion stages. To compute excitation and radiation properties, collisional radiative equilibria of individual ion stages are computed. For many lines opacity effects cannot be neglected. In the xenon discharges the optical depths allow for a treatment based on escape factors. Due to the rapid change of plasma parameters the abundancies of the different ionization stages must be computed dynamically. This requires effective ionization and recombination rates, which can also be supplied by ADAS. Due to very steep gradients (up to a couple orders of magnitude per mm) the plasma of tin vacuum spark discharges is very complicated. Therefore we shall describe here only some technological aspects of our tin EUV lamp: The electrode system consists of two rotating which are pulled through baths of molten tin such that a tin film remains on their surfaces. With a laser pulse some tin is ablated from one of the wheels and travels rapidly through vacuum towards the other rotating wheel. When the tin plasma reaches the other electrodes it ignites and the high current phase starts, i.e. the capacitor bank is unloaded, the plasma is pinched and EUV is radiated. Besides the good spectral properties of tin this concept has some other advantages: Erosion of electrodes is no severe problem as the tin film is

  12. Investigation of rf plasma light sources for dye laser excitation

    International Nuclear Information System (INIS)

    Kendall, J.S.; Jaminet, J.F.

    1975-06-01

    Analytical and experimental studies were performed to assess the applicability of radio frequency (rf) induction heated plasma light sources for potential excitation of continuous dye lasers. Experimental efforts were directed toward development of a continuous light source having spectral flux and emission characteristics approaching that required for pumping organic dye lasers. Analytical studies were performed to investigate (1) methods of pulsing the light source to obtain higher radiant intensity and (2) methods of integrating the source with a reflective cavity for pumping a dye cell. (TFD)

  13. Plasma remediation of trichloroethylene in silent discharge plasmas

    International Nuclear Information System (INIS)

    Evans, D.; Rosocha, L.A.; Anderson, G.K.; Coogan, J.J.; Kushner, M.J.

    1993-01-01

    Plasma destruction of toxins, and volatile organic compounds in particular, from gas streams is receiving increased attention as an energy efficient means to remediate those compounds. In this regard, remediation of trichloroethylene (TCE) in silent discharge plasmas has been experimentally and theoretically investigated. We found that TCE can be removed from Ar/O 2 gas streams at atmospheric pressure with an energy efficiency of 15--20 ppm/(mJ/cm 3 ), or 2--3 kW h kg -1 . The majority of the Cl from TCE is converted to HCl, Cl 2 , and COCl 2 , which can be removed from the gas stream by a water bubbler. The destruction efficiency of TCE is smaller in humid mixtures compared to dry mixtures due to interception of reactive intermediates by OH radicals

  14. Plasma polymer films rf sputtered from PTFE under various argon pressures

    Czech Academy of Sciences Publication Activity Database

    Stelmashuk, Vitaliy; Biederman, H.; Slavinská, D.; Zemek, Josef; Trchová, Miroslava

    2005-01-01

    Roč. 77, č. 2 (2005), s. 131-137 ISSN 0042-207X R&D Projects: GA MŠk(CZ) OC 527.10; GA MŠk(CZ) OC 527.90 Grant - others:EUREKAΣ2080(XE) OE57 Institutional research plan: CEZ:AV0Z10100521; CEZ:AV0Z20430508 Keywords : RF sputtering * PTFE * fluorcarbon plasma polymers * thin film * teflon * deposition Subject RIV: BM - Solid Matter Physics ; Magnetism Impact factor: 0.909, year: 2005

  15. Very low frequency oscillations of heat load and recycling flux in steady-state tokamak discharge in TRIAM-1M

    Energy Technology Data Exchange (ETDEWEB)

    Zushi, H.; Sakamoto, M.; Hanada, K.; Iyomasa, A.; Nakamura, K.; Sato, K.N.; Idei, H.; Kawasaki, S.; Nakashima, H.; Higashijima, A.; Hasegawa, M. [Kyushu Univ., Research Institute for Applied Mechanics (Japan); Matsuo, Y.; Kuramoto, K.; Sugata, T.; Maezono, N.; Hoshika, H.; Sasaki, K. [Kyushu Univ., Interdisciplinary Graduate School of Engineering Sciences (Japan)

    2004-07-01

    Plasma wall interaction (PWI) driven relaxation oscillations are investigated in the steady state discharge for 5 hours. The oscillation frequency was about 10{sup -3} Hz and each perturbation lasted for about 300 s. The heat load, recycling flux and impurity influx were varied from a few % to several tens of %. The largest variation of 70% was seen on the Mo XIII (molybdenum), although the influx of Mo I was only 20 %. Although the input rf power is kept constant during the discharge, the coupling between the rf and plasma was increased by about 10%. The current drive efficiency is decreased by 24 % in spite of current ramp. The toroidal and poloidal profiles of the recycling flux were also changed. During the last relaxation phase, the plasma was finally terminated. The current reduction (> 4 kA) was not recovered by intense local perturbation of the recycling superposed on the relaxation oscillation. (authors)

  16. Spectroscopic evaluation of the effect of the microparticles on radiofrequency argon plasma

    International Nuclear Information System (INIS)

    Mitic, S; Pustylnik, M Y; Morfill, G E

    2009-01-01

    Axial distributions of 1s excited states of argon were measured in a radiofrequency (RF) discharge by a self-absorption method. Experiments were performed in the PK-3+ chamber, designed for microgravity experiments in complex (dusty) plasmas on board the International Space Station. A correction of a standard self-absorption method for the extinction of the light by the levitating microparticles is proposed. Distributions, measured at the same discharge conditions in a microparticle-free discharge and a discharge containing a cloud of levitating microparticles, revealed the non-local influence of the microparticle cloud on the discharge plasma. The most probable cause of this influence is the disturbance of the ionization balance by the levitating microparticles.

  17. RF induction plasma spheroidization of tungsten powders

    International Nuclear Information System (INIS)

    Gu Zhogntao; Ye Gaoying; Liu Chuandong; Tong Honghui

    2009-01-01

    Irregularly-shaped tungsten powders (average granular sizes of 512 μm) have been spheroidized by radio frequency (RF)induction plasma. The effects of feed rate, mode of material dispersion, particle size on spheroidization efficiency are investigated. Experimental results show that the spheroidization efficiency decreases rapidly when the feed rate increases to more than 95 g/min. Only 30% spheroidization efficiency is gained at the feed rate of 135.75 g/min. The spheroidization efficiency is also affected by the flow rate of carrier gas. When the flow rate of carrier gas is 0.12 m 3 /h, the dispersion effect is the best, and the spheroidization efficiency is almost 100%. The apparent density of tungsten powders increases a bit with the increase of spheroidization efficiency. And the particle size uniformity of spheroidized tungsten powders is in accordance with that of original powders. (authors)

  18. Pulsed hollow cathode discharge: intense electron beam and filamentary plasma

    International Nuclear Information System (INIS)

    Modreanu, Gabriel

    1998-01-01

    This work deals with a transient hollow cathode discharge optimised by a preionization one and providing intense electron beams. It exists a preionization current value for which the pulsed discharge becomes a very straight and bright filament, well collimated on the discharge tube axis for some tenths of centimeters. A remarkable feature of this discharge is that, without internal metallic electrodes very pure plasma could be produced. Using self-biasing by the beam of a Faraday cup placed only few millimeters behind the anode, we deduced the beam electron's distribution function and its temporal behavior for two radial positions, on the axis and 1 millimeter off-axis, respectively. The real advantage of this measurement technique is the transient polarization character, which allows analysis very closely from the electron beam extraction hole. On the other side, using the emission spectroscopy, we have studied the plasma produced in electron beam - gas interaction and deduced the temporal evolution of the electron temperature. The temporal behavior of the filamentary plasma diameter shows a constriction at the last moments of the beam existence, followed by diffusion controlled expansion. The ambipolar diffusion coefficient corresponding to the estimated electron temperature describes quite well this expansion and allows a quantitative interpretation of the measured temperature diminution, with taking into account the preferential fast electrons escape. The analysis of both beam and post-beam plasma phases suggests potential applications of this robust, very reproducible and not expensive discharge also susceptible to be external monitored. The beam - target interaction could be used for PVD, elementary analysis and filamentary or point-like X-ray emission. (author) [fr

  19. RF sheaths for arbitrary B field angles

    Science.gov (United States)

    D'Ippolito, Daniel; Myra, James

    2014-10-01

    RF sheaths occur in tokamaks when ICRF waves encounter conducting boundaries and accelerate electrons out of the plasma. Sheath effects reduce the efficiency of ICRF heating, cause RF-specific impurity influxes from the edge plasma, and increase the plasma-facing component damage. The rf sheath potential is sensitive to the angle between the B field and the wall, the ion mobility and the ion magnetization. Here, we obtain a numerical solution of the non-neutral rf sheath and magnetic pre-sheath equations (for arbitrary values of these parameters) and attempt to infer the parametric dependences of the Child-Langmuir law. This extends previous work on the magnetized, immobile ion regime. An important question is how the rf sheath voltage distributes itself between sheath and pre-sheath for various B field angles. This will show how generally previous estimates of the rf sheath voltage and capacitance were reasonable, and to improve the RF sheath BC. Work supported by US DOE grants DE-FC02-05ER54823 and DE-FG02-97ER54392.

  20. An amplitude modulated radio frequency plasma generator

    Science.gov (United States)

    Lei, Fan; Li, Xiaoping; Liu, Yanming; Liu, Donglin; Yang, Min; Xie, Kai; Yao, Bo

    2017-04-01

    A glow discharge plasma generator and diagnostic system has been developed to study the effects of rapidly variable plasmas on electromagnetic wave propagation, mimicking the plasma sheath conditions encountered in space vehicle reentry. The plasma chamber is 400 mm in diameter and 240 mm in length, with a 300-mm-diameter unobstructed clear aperture. Electron densities produced are in the mid 1010 electrons/cm3. An 800 W radio frequency (RF) generator is capacitively coupled through an RF matcher to an internally cooled stainless steel electrode to form the plasma. The RF power is amplitude modulated by a waveform generator that operates at different frequencies. The resulting plasma contains electron density modulations caused by the varying power levels. A 10 GHz microwave horn antenna pair situated on opposite sides of the chamber serves as the source and detector of probe radiation. The microwave power feed to the source horn is split and one portion is sent directly to a high-speed recording oscilloscope. On mixing this with the signal from the pickup horn antenna, the plasma-induced phase shift between the two signals gives the path-integrated electron density with its complete time dependent variation. Care is taken to avoid microwave reflections and extensive shielding is in place to minimize electronic pickup. Data clearly show the low frequency modulation of the electron density as well as higher harmonics and plasma fluctuations.

  1. PEO-like Plasma Polymers Prepared by Atmospheric Pressure Surface Dielectric Barrier Discharge

    Czech Academy of Sciences Publication Activity Database

    Gordeev, I.; Choukourov, A.; Šimek, Milan; Prukner, Václav; Biederman, H.

    2012-01-01

    Roč. 9, č. 8 (2012), s. 782-791 ISSN 1612-8850 R&D Projects: GA ČR(CZ) GD104/09/H080 Institutional research plan: CEZ:AV0Z20430508 Keywords : fibrinogen * non-fouling properties * PEO * plasma polymerization * surface dielectric barrier discharge Subject RIV: BL - Plasma and Gas Discharge Physics Impact factor: 3.730, year: 2012

  2. Transmission characteristics of microwave in a glow-discharge dusty plasma

    Science.gov (United States)

    Jia, Jieshu; Yuan, Chengxun; Gao, Ruilin; Liu, Sha; Yue, Feng; Wang, Ying; Zhou, Zhong-Xiang; Wu, Jian; Li, Hui

    2016-07-01

    In this study, the propagation characteristics of electromagnetic wave in a glow discharge plasma with dust particles are experimentally investigated. A helium alternating current glow discharge plasmas have been successfully generated. Measurements of the plasma parameters using Langmuir probes, in the absence of dust particles, provide plasma densities (ne) of 1017 m-3 and electron temperatures (Te) ranging from 2 to 4 eV. Dusty plasmas are made by adding 30 nm radius aluminum oxide (Al2O3) particles into the helium plasma. The density of the dust particle (nd) in the device is about 1011-1012 m-3. The propagation characteristics of electromagnetic waves are determined by a vector network analyzer with 4-6 GHz antennas. An apparent attenuation by the dust is observed, and the measured attenuation data are approximately in accordance with the theoretical calculations. The effects of gas pressure and input power on the propagation are also investigated. Results show that the transmission attenuation increases with the gas pressure and input power, the charged dust particles play a significant role in the microwave attenuation.

  3. An investigation of an underwater steam plasma discharge as alternative to air plasmas for water purification

    International Nuclear Information System (INIS)

    Gucker, Sarah N; Foster, John E; Garcia, Maria C

    2015-01-01

    An underwater steam plasma discharge, in which water itself is the ionizing media, is investigated as a means to introduce advanced oxidation species into contaminated water for the purpose of water purification. The steam discharge avoids the acidification observed with air discharges and also avoids the need for a feed gas, simplifying the system. Steam discharge operation did not result in a pH changes in the processing of water or simulated wastewater, with the actual pH remaining roughly constant during processing. Simulated wastewater has been shown to continue to decompose significantly after steam treatment, suggesting the presence of long-lived plasma produced radicals. During steam discharge operation, nitrate production is limited, and nitrite production was found to be below the detection threshold of (roughly 0.2 mg L −1 ). The discharge was operated over a broad range of deposited power levels, ranging from approximately 30 W to 300 W. Hydrogen peroxide production was found to scale with increasing power. Additionally, the hydrogen peroxide production efficiency of the discharge was found to be higher than many of the rates reported in the literature to date. (paper)

  4. Modification of track membranes structure by gas discharge etching method

    International Nuclear Information System (INIS)

    Dmitriev, S.N.; Kravets, L.I.

    1996-01-01

    An investigation of the properties of polyethyleneterephthalate track membranes (PET TM) treated with the plasma RF-discharge in air has been performed. The influence of the plasma treatment conditions on the basic properties of the membranes, namely pore size and pore shape, porosity and mechanical strength has been studied. It was arranged that the effect of air plasma on the PET TM results to etching a membrane's surface layer. The membranes' pore size and the form in this case change. It is shown that it is possible to change the structure of track membranes directly by the gas discharge etching method. Depending on the choice of discharge parameters, it is possible to make etching either in a part of the channel or along the whole length of the pore channels. In both cases the membranes with an asymmetric pore shape are formed which possess higher porosity and flow rate. The use of the membranes of such a type allows one to increase drastically the efficiency of the filtration processes. 12 refs., 5 figs., 1 tab

  5. Interaction of Plasma Discharges with a Flame: Experimental and Numerical Study

    International Nuclear Information System (INIS)

    Vincent-Randonnier, Axel; Teixeira, David

    2010-01-01

    This paper presents experimental results and numerical simulations of methane/air non-premixed flame under plasma assistance. Without plasma assistance, the flame blows off at a 28-30 m·s -1 bulk velocity (power around 3 kW). When the discharge is on, the flame can be maintained up to a bulk velocity of 53 m·s -1 (power around 6 kW), corresponding to +90% gain in power with only a few watt of plasma power. The plasma discharges present short duration current pulses (between 100 ns and 200 ns) and occur non-monotonically (delay between two pulses from 6x10 -5 s to 0.1 s). The probability density function of this occurrence is significantly influenced by the mass flow rate or the absence of flame, revealing the strong coupling of the plasma with hydrodynamic and combustion. For the numerical section of this work, we simulated the flame using a Computational Fluid Dynamics code based on Direct Numerical Simulation (direct solving of Navier-Stokes equations), and investigated the thermal and/or chemical effects of discharges on the flame stability.

  6. Power supply and impedance matching to drive technological radio-frequency plasmas with customized voltage waveforms.

    Science.gov (United States)

    Franek, James; Brandt, Steven; Berger, Birk; Liese, Martin; Barthel, Matthias; Schüngel, Edmund; Schulze, Julian

    2015-05-01

    We present a novel radio-frequency (RF) power supply and impedance matching to drive technological plasmas with customized voltage waveforms. It is based on a system of phase-locked RF generators that output single frequency voltage waveforms corresponding to multiple consecutive harmonics of a fundamental frequency. These signals are matched individually and combined to drive a RF plasma. Electrical filters are used to prevent parasitic interactions between the matching branches. By adjusting the harmonics' phases and voltage amplitudes individually, any voltage waveform can be approximated as a customized finite Fourier series. This RF supply system is easily adaptable to any technological plasma for industrial applications and allows the commercial utilization of process optimization based on voltage waveform tailoring for the first time. Here, this system is tested on a capacitive discharge based on three consecutive harmonics of 13.56 MHz. According to the Electrical Asymmetry Effect, tuning the phases between the applied harmonics results in an electrical control of the DC self-bias and the mean ion energy at almost constant ion flux. A comparison with the reference case of an electrically asymmetric dual-frequency discharge reveals that the control range of the mean ion energy can be significantly enlarged by using more than two consecutive harmonics.

  7. Depth-profile analysis of thermoelectric layers on Si wafers by pulsed r.f. glow discharge time-of-flight mass spectrometry

    International Nuclear Information System (INIS)

    Reinsberg, K.-G.; Schumacher, C.; Tempez, A.; Nielsch, K.; Broekaert, J.A.C.

    2012-01-01

    In this work the depth-profile analysis of thermoelectric layers deposited on Au and Cr covered Si wafers with the aid of pulsed radiofrequency glow discharge time-of-flight mass spectrometry (pulsed RF-GD-TOFMS also called plasma profiling TOFMS (PP-TOFMS™)) is described. For thermoelectric materials the depth resolutions obtained with both PP-TOFMS and secondary ion mass spectrometry (SIMS) are shown to be well comparable and in the order of the roughness of the corresponding layers (between 20 and 3700 nm). With both methods a direct solid analysis without any preparation steps is possible. In addition, the analysis of the samples with PP-TOFMS proved to be faster by a factor of 26 compared to SIMS, as sputtering rates were found to be 80 nm s −1 and 3 nm s −1 , respectively. For the analyzed samples the results of PP-TOFMS and SIMS show that a homogeneous deposition was obtained. Quantitative results for all samples could also be obtained directly by PP-TOFMS when the stoichiometry of one sample was determined beforehand for instance by inductively coupled plasma optical emission spectrometry (ICP-OES) and scanning electron microscopy energy dispersive X-ray fluorescence spectrometry (SEM-EDX). For Bi 2 Te 3 the standard deviation for the main component concentrations within one sample then is found to be between 1.1% and 1.9% and it is 3.6% from sample to sample. For Sb 2 Te 3 the values within one sample are from 1.7% to 4.2% and from sample to sample 5.3%, respectively. - Highlights: ► Depth resolution in sub micrometer size by glow discharge mass spectrometry. ► Bi and Sb telluride layers composition with GD-TOF-MS, ICP-OES and SEM-EDX agree. ► Homogeneities of layers measured with GD-TOF-MS and SIMS agree.

  8. Deterministic dynamics of plasma focus discharges

    International Nuclear Information System (INIS)

    Gratton, J.; Alabraba, M.A.; Warmate, A.G.; Giudice, G.

    1992-04-01

    The performance (neutron yield, X-ray production, etc.) of plasma focus discharges fluctuates strongly in series performed with fixed experimental conditions. Previous work suggests that these fluctuations are due to a deterministic ''internal'' dynamics involving degrees of freedom not controlled by the operator, possibly related to adsorption and desorption of impurities from the electrodes. According to these dynamics the yield of a discharge depends on the outcome of the previous ones. We study 8 series of discharges in three different facilities, with various electrode materials and operating conditions. More evidence of a deterministic internal dynamics is found. The fluctuation pattern depends on the electrode materials and other characteristics of the experiment. A heuristic mathematical model that describes adsorption and desorption of impurities from the electrodes and their consequences on the yield is presented. The model predicts steady yield or periodic and chaotic fluctuations, depending on parameters related to the experimental conditions. (author). 27 refs, 7 figs, 4 tabs

  9. Utilization of ultraviolet radiation of cold hollow cathode discharge plasma for water disinfection

    International Nuclear Information System (INIS)

    Soloshenko, I.O.; Bazhenov, V.Yu.; Khomych, V.O.; Tsiolko, V.V.; Potapchenko, N.G.; Goncharuk, V.V.

    2006-01-01

    We study the possibility to use the ultraviolet radiation of a hollow cathode discharge plasma for water disinfection. We have performed the comparative experiments on the influence of ultraviolet radiation of the mentioned discharge plasma, as well as that of a standard low pressure mercury lamp

  10. RF plasma cleaning of silicon substrates with high-density polyethylene contamination

    Science.gov (United States)

    Cagomoc, Charisse Marie D.; De Leon, Mark Jeffry D.; Ebuen, Anna Sophia M.; Gilos, Marlo Nicole R.; Vasquez, Magdaleno R., Jr.

    2018-01-01

    Upon contact with a polymeric material, microparticles from the polymer may adhere to a silicon (Si) substrate during device processing. The adhesion contaminates the surface and, in turn, leads to defects in the fabricated Si-based microelectronic devices. In this study, Si substrates with artificially induced high-density polyethylene (HDPE) contamination was exposed to 13.56 MHz radio frequency (RF) plasma utilizing argon and oxygen gas admixtures at a power density of 5.6 W/cm2 and a working pressure of 110 Pa for up to 6 min of treatment. Optical microscopy studies revealed the removal of up to 74% of the polymer contamination upon plasma exposure. Surface free energy (SFE) increased owing to the removal of contaminants as well as the formation of polar groups on the Si surface after plasma treatment. Atomic force microscopy scans showed a decrease in surface roughness from 12.25 nm for contaminated samples to 0.77 nm after plasma cleaning. The smoothening effect can be attributed to the removal of HDPE particles from the surface. In addition, scanning electron microscope images showed that there was a decrease in the amount of HDPE contaminants adhering onto the surface after plasma exposure.

  11. Observation of Ω mode electron heating in dusty argon radio frequency discharges

    Energy Technology Data Exchange (ETDEWEB)

    Killer, Carsten; Bandelow, Gunnar; Schneider, Ralf; Melzer, André [Institut für Physik, Ernst-Moritz-Arndt-Universität Greifswald, 17489 Greifswald (Germany); Matyash, Konstantin [Universitätsrechenzentrum, Ernst-Moritz-Arndt-Universität Greifswald, 17489 Greifswald (Germany)

    2013-08-15

    The time-resolved emission of argon atoms in a dusty plasma has been measured with phase-resolved optical emission spectroscopy using an intensified charge-coupled device camera. For that purpose, three-dimensional dust clouds have been confined in a capacitively coupled rf argon discharge with the help of thermophoretic levitation. While electrons are exclusively heated by the expanding sheath (α mode) in the dust-free case, electron heating takes place in the entire plasma bulk when the discharge volume is filled with dust particles. Such a behavior is known as Ω mode, first observed in electronegative plasmas. Furthermore, particle-in-cell simulations have been carried out, which reproduce the trends of the experimental findings. These simulations support previous numerical models showing that the enhanced atomic emission in the plasma can be attributed to a bulk electric field, which is mainly caused by the reduced electrical conductivity due to electron depletion.

  12. Diagnostics of N{sub 2}-Ar plasma mixture excited in a 13.56 MHz hollow cathode discharge system: application to remote plasma treatment of polyamide surface

    Energy Technology Data Exchange (ETDEWEB)

    Saloum, S; Naddaf, M; Alkhaled, B [Atomic Energy Commission of Syria (AECS), Physics Department, PO Box 6091, Damascus (Syrian Arab Republic)], E-mail: scientific@aec.org.sy

    2008-02-21

    N{sub 2}-x% Ar plasma gas mixture, generated in a hollow cathode RF discharge system, has been characterized by both optical emission spectroscopy (OES) and double Langmuir probe, as a function of experimental parameters: total pressure (5-33 Pa), and different fractions of argon (7 {<=} x {<=} 80), at a constant applied RF power of 300 W. N{sub 2} dissociation degree has been investigated qualitatively by both the actinometry method and the ratio I{sub N}/I{sub N{sub 2}} of the atomic nitrogen line emission intensity at 672.3 nm to the vibrational band (0-0) of the N{sub 2} second positive system at 337.1 nm. Both methods showed that the increase in argon fraction enhances the dissociation of N{sub 2}, with a maximum at x = 50 for the pressure of 5 Pa, although the two methods give two opposite trends as a function of total pressure. Spectroscopic measurements showed that the vibrational temperature of the N{sub 2} second positive system increases with both argon fraction and total pressure increase, it lies between 4900 and 12 300 K. Langmuir probe measurements showed that, in the remote zone, the electron temperature falls in the range 1.57-1.75 eV, the N{sub 2}{sup +} density varies between 5 x 10{sup 9} and 1.4 x 10{sup 10} cm{sup -3} and that both the plasma ionization degree and electron temperature increase towards the source. In addition, the process of plasma-polyamide (PA) surface interaction, in the remote plasma zone, has been studied through OES analysis during plasma treatment of PA to monitor the possible emissions due to the polymer etching. An increase in atomic nitrogen line (672.3 nm) intensity is obtained, atomic carbon line (833.52 nm) and the band emission (0-0) from the CN (B {sup 2}{sigma}{sup +}-X {sup 2}{sigma}{sup +}) violet system were observed. The PA surface modification has been confirmed through the improvement of its hydrophilic character as the water contact angle measured after the plasma treatment significantly decreased.

  13. Role of MHD activity in LH-assisted discharges in the PBX-M tokamak

    International Nuclear Information System (INIS)

    Talvard, M.; Bell, R.E.; Bernabei, S.; Kaye, S.; Okabayashi, M.; Sesnic, S.; von Goeler, S.

    1995-01-01

    A data base for the 1993 run period of PBX-M has been documented (i) to investigate whether it was possible to forecast the development of MHD instabilities often observed in LH assisted discharges and (ii) to detail the origin, the nature and the effects of those instabilities. The deposition radius of the RF current, the plasma internal inductance and the LH power are used to separate MHD active and quiescent regimes prior the MHD onset. 1/1, 2/1, 3/1 global modes driven by the m = 2, n = 1 component are observed in discharges with LHCD. The destabilization is attributed to an increase of the current density gradient within the q = 2 surface. MHD fluctuations reduce the soft x-ray and hard x-ray intensities mainly around the RF current deposition radius. Minor disruptions with large inversion radii and mode locking are analyzed. Pi possible precursor to the MHD is evidenced on the hard x-ray horizontal profiles. A resonance between fast trapped electrons and turbulent waves present in the background plasma is proposed to support the observations

  14. Sputter deposition of tantalum-nitride films on copper using an rf-plasma

    International Nuclear Information System (INIS)

    Walter, K.C.; Fetherston, R.P.; Sridharan, K.; Chen, A.; Shamim, M.M.; Conrad, J.R.

    1994-01-01

    A tantalum-nitride film was successfully deposited at ambient temperature on copper with a modified ion-assisted-deposition (IAD) technique. The process uses an argon and nitrogen plasma to sputter deposit from a tantalum rf-cathode and ion implant the deposited film simultaneously. Both argon and nitrogen ions are used for sputtering and ion implantation. Auger spectroscopy and x-ray diffraction were used to characterize the resulting film

  15. Gas-discharge sources with charged particle emission from the plasma of glow discharge with a hollow cathode

    CERN Document Server

    Semenov, A P

    2001-01-01

    One studied properties of a magnetron discharge with a cold hollow and uncooled rod cathodes. One demonstrated the dominant effect of thermoelectron emission of a rod cathode heated in a discharge on characteristics of discharge and on emission properties of a gas-discharge plasma and the possibility pf a smooth transition of glow discharge to diffusion mode of arc discharge combustion. Paper describes sources of ions and electrons with improved physical and generalized design and engineering parameters. One shows the promise of the electrode structure of a hollow cathode magnetron discharge to be used as a source, in particular, of the atomic hydrogen and of atom flow of a working rod cathode

  16. About of the Electrostatic fields excitation theory by a RF wave in a plasma; Acerca de la teoria de excitacion de campos electrostaticos por una onda de rf en un plasma

    Energy Technology Data Exchange (ETDEWEB)

    Gutierrez T, C.R

    1991-01-15

    In an unidimensional model is shown in the cases of a semi limited plasma and a layer of plasma the excitement mechanism of electrostatic fields for a radiofrequency wave (RF) polarized lineally. This phenomenon depends strongly on the combined action of the Miller force and that of impulsion. It is shown that the action of these forces is carried out in different characteristic times when the front of wave crosses through the plasma. The cases of a semi limited plasma and of a layer of plasma without and with current are analyzed. It is shown that near the frontiers of the plasma where the field is sufficiently big arise oscillations of the width of the field that are slowly muffled in the space in an exponential way. In the cases of a plasma layer its are shown that the processes that arise near the frontier x = L are similar to the processes that arise near the frontier x = 0. The existence of current in the plasma layer leads to the blockade of the excited perturbations in the frontier x = L. (Author)

  17. Modeling of Perpendicularly Driven Dual-Frequency Capacitively Coupled Plasma

    International Nuclear Information System (INIS)

    Wang Hongyu; Sun Peng; Zhao Shuangyun; Li Yang; Jiang Wei

    2016-01-01

    We analyzed perpendicularly configured dual-frequency (DF) capacitively coupled plasmas (CCP). In this configuration, two pairs of electrodes are arranged oppositely, and the discharging is perpendicularly driven by two radio frequency (RF) sources. Particle-in-cell/Monte Carlo (PIC/MC) simulation showed that the configuration had some advantages as this configuration eliminated some dual frequency coupling effects. Some variation and potential application of the discharging configuration is discussed briefly. (paper)

  18. Plasma pressure in the discharge column of the Novillo Tokamak

    International Nuclear Information System (INIS)

    Gaytan G, E.

    1995-01-01

    The design and construction of an acquisition system for the measurement of the plasma pressure in the Novillo Tokamak is described in detail. The system includes a high voltage ramp generator, a hardware and a software interface with a personal computer. It is used to determine experimentally the variations of the pressure in the plasma column in the cleaning and main discharges. The measurement of the pressure is made with a Pirani sensor adapted to the acquisition hardware and synchronized with the discharge in the plasma. The software is made in object oriented programming as a graphic interface designed to be used easily. It controls the acquisition, records the data, displays in graphic form the results and save the measurements. The graphic interface is a building block that can be used in different acquisition tasks. The ramp generator can deliver a signal of 200 V peak to peak with a current of 200 m A and offset control. The acquisition time is 2.5 μ s for every measurement, 8192 measurements can be stored in the acquisition board for every discharge. (Author)

  19. Characteristics of cold atmospheric plasma source based on low-current pulsed discharge with coaxial electrodes

    Science.gov (United States)

    Bureyev, O. A.; Surkov, Yu S.; Spirina, A. V.

    2017-05-01

    This work investigates the characteristics of the gas discharge system used to create an atmospheric pressure plasma flow. The plasma jet design with a cylindrical graphite cathode and an anode rod located on the axis of the system allows to realize regularly reproducible spark breakdowns mode with a frequency ∼ 5 kHz and a duration ∼ 40 μs. The device generates a cold atmospheric plasma flame with 1 cm in diameter in the flow of various plasma forming gases including nitrogen and air at about 100 mA average discharge current. In the described construction the cathode spots of individual spark channels randomly move along the inner surface of the graphite electrode creating the secondary plasma stream time-average distributed throughout the whole exit aperture area after the decay of numerous filamentary discharge channels. The results of the spectral diagnostics of plasma in the discharge gap and in the stream coming out of the source are presented. Despite the low temperature of atoms and molecules in plasma stream the cathode spots operation with temperature of ∼ 4000 °C at a graphite electrode inside a discharge system enables to saturate the plasma by CN-radicals and atomic carbon in the case of using nitrogen as the working gas.

  20. Temporally resolved ozone distribution of a time modulated RF atmospheric pressure argon plasma jet: flow, chemical reaction, and transient vortex

    International Nuclear Information System (INIS)

    Zhang, S; Sobota, A; Van Veldhuizen, E M; Bruggeman, P J

    2015-01-01

    The ozone density distribution in the effluent of a time modulated RF atmospheric pressure plasma jet (APPJ) is investigated by time and spatially resolved by UV absorption spectroscopy. The plasma jet is operated with an averaged dissipated power of 6.5 W and gas flow rate 2 slm argon  +2% O 2 . The modulation frequency of the RF power is 50 Hz with a duty cycle of 50%. To investigate the production and destruction mechanism of ozone in the plasma effluent, the atomic oxygen and gas temperature is also obtained by TALIF and Rayleigh scattering, respectively. A temporal increase in ozone density is observed close to the quartz tube exit when the plasma is switched off due to the decrease in O density and gas temperature. Ozone absorption at different axial positions indicates that the ozone distribution is dominated by the convection induced by the gas flow and allows estimating the on-axis local gas velocity in the jet effluent. Transient vortex structures occurring during the switch on and off of the RF power also significantly affect the ozone density in the far effluent. (paper)

  1. Is the negative glow plasma of a direct current glow discharge negatively charged?

    International Nuclear Information System (INIS)

    Bogdanov, E. A.; Saifutdinov, A. I.; Demidov, V. I.; Kudryavtsev, A. A.

    2015-01-01

    A classic problem in gas discharge physics is discussed: what is the sign of charge density in the negative glow region of a glow discharge? It is shown that traditional interpretations in text-books on gas discharge physics that states a negative charge of the negative glow plasma are based on analogies with a simple one-dimensional model of discharge. Because the real glow discharges with a positive column are always two-dimensional, the transversal (radial) term in divergence with the electric field can provide a non-monotonic axial profile of charge density in the plasma, while maintaining a positive sign. The numerical calculation of glow discharge is presented, showing a positive space charge in the negative glow under conditions, where a one-dimensional model of the discharge would predict a negative space charge

  2. Modulation of ionization in the plasma column of an optical discharge

    International Nuclear Information System (INIS)

    Nastoyashchii, A.F.

    1981-01-01

    Stability of the ionization in the plasma column of an optical discharge is discussed. It is shown that a plasma filament formed by a long laser spike under optical discharge conditions may break up into a chain of bright luminous layers oriented in the direction of propagation of a laser beam and characterized by a higher gas ionization (''optical striations''). A nonlinear formulation of the problem is used to find the depth of modulation of the gas ionization

  3. Effect of the levitating microparticle cloud on radiofrequency argon plasma

    International Nuclear Information System (INIS)

    Mitic, S.; Pustylnik, M. Y.; Klumov, B. A.; Morfill, G. E.

    2010-01-01

    The effect of a levitating cloud of microparticles on the parameters of a radiofrequency (RF) plasma has been studied by means of two experimental techniques. Axial distributions of 1s excited states of argon were measured by a self-absorption method. A correction of a standard self-absorption method for the extinction of the light by the levitating microparticles is proposed. In addition the electron temperature was estimated using the optical emission spectroscopy. Measurements at the same discharge conditions in a microparticle-free discharge and discharge, containing a cloud of levitating microparticles, revealed the non-local influence of the microparticle cloud on the discharge plasma. The most probable cause of this influence is the disturbance of the ionization balance by the levitating microparticles.

  4. Electron density measurement in gas discharge plasmas by optical and acoustic methods

    International Nuclear Information System (INIS)

    Biagioni, A.; Anania, M.P.; Bellaveglia, M.; Chiadroni, E.; Giovenale, D. Di; Pirro, G. Di; Ferrario, M.; Pompili, R.; Shpakov, V.; Vaccarezza, C.; Villa, F.; Cianchi, A.; Filippi, F.; Mostacci, A.; Zigler, A.

    2016-01-01

    Plasma density represents a very important parameter for both laser wakefield and plasma wakefield acceleration, which use a gas-filled capillary plasma source. Several techniques can be used to measure the plasma density within a capillary discharge, which are mainly based on optical diagnostic methods, as for example the well-known spectroscopic method using the Stark broadening effect. In this work, we introduce a preliminary study on an alternative way to detect the plasma density, based on the shock waves produced by gas discharge in a capillary. Firstly, the measurements of the acoustic spectral content relative to the laser-induced plasmas by a solid target allowed us to understand the main properties of the acoustic waves produced during this kind of plasma generation; afterwards, we have extended such acoustic technique to the capillary plasma source in order to calibrate it by comparison with the stark broadening method.

  5. Thrust performance, propellant ionization, and thruster erosion of an external discharge plasma thruster

    Science.gov (United States)

    Karadag, Burak; Cho, Shinatora; Funaki, Ikkoh

    2018-04-01

    It is quite a challenge to design low power Hall thrusters with a long lifetime and high efficiency because of the large surface area to volume ratio and physical limits to the magnetic circuit miniaturization. As a potential solution to this problem, we experimentally investigated the external discharge plasma thruster (XPT). The XPT produces and sustains a plasma discharge completely in the open space outside of the thruster structure through a magnetic mirror configuration. It eliminates the very fundamental component of Hall thrusters, discharge channel side walls, and its magnetic circuit consists solely of a pair of hollow cylindrical permanent magnets. Thrust, low frequency discharge current oscillation, ion beam current, and plasma property measurements were conducted to characterize the manufactured prototype thruster for the proof of concept. The thrust performance, propellant ionization, and thruster erosion were discussed. Thrust generated by the XPT was on par with conventional Hall thrusters [stationary plasma thruster (SPT) or thruster with anode layer] at the same power level (˜11 mN at 250 W with 25% anode efficiency without any optimization), and discharge current had SPT-level stability (Δ design and provide a successful proof of concept experiment of the XPT.

  6. Dependence of beam emittance on plasma electrode temperature and rf-power, and filter-field tuning with center-gapped rod-filter magnets in J-PARC rf-driven H− ion source

    International Nuclear Information System (INIS)

    Ueno, A.; Koizumi, I.; Ohkoshi, K.; Ikegami, K.; Takagi, A.; Yamazaki, S.; Oguri, H.

    2014-01-01

    The prototype rf-driven H − ion-source with a nickel plated oxygen-free-copper (OFC) plasma chamber, which satisfies the Japan Proton Accelerator Research Complex (J-PARC) 2nd stage requirements of a H − ion beam current of 60 mA within normalized emittances of 1.5 π mm mrad both horizontally and vertically, a flat top beam duty factor of 1.25% (500 μs × 25 Hz) and a life-time of more than 50 days, was reported at the 3rd international symposium on negative ions, beams, and sources (NIBS2012). The experimental results of the J-PARC ion source with a plasma chamber made of stainless-steel, instead of nickel plated OFC used in the prototype source, are presented in this paper. By comparing these two sources, the following two important results were acquired. One was that the about 20% lower emittance was produced by the rather low plasma electrode (PE) temperature (T PE ) of about 120 °C compared with the typically used T PE of about 200 °C to maximize the beam current for the plasma with the abundant cesium (Cs). The other was that by using the rod-filter magnets with a gap at each center and tuning the gap-lengths, the filter-field was optimized and the rf-power necessary to produce the J-PARC required H − ion beam current was reduced typically 18%. The lower rf-power also decreases the emittances

  7. DOE planning workshop on rf theory and computations

    International Nuclear Information System (INIS)

    1984-01-01

    The purpose of the two-day workshop-meeting was to review the status of rf heating in magnetic fusion plasmas and to determine the outstanding problems in this area. The term rf heating was understood to encompass not only bulk plasma heating by externally applied electromagnetic power but also current generation in toroidal plasmas and generation of thermal barriers in tandem mirror plasmas

  8. Time-Domain Modeling of RF Antennas and Plasma-Surface Interactions

    Directory of Open Access Journals (Sweden)

    Jenkins Thomas G.

    2017-01-01

    Full Text Available Recent advances in finite-difference time-domain (FDTD modeling techniques allow plasma-surface interactions such as sheath formation and sputtering to be modeled concurrently with the physics of antenna near- and far-field behavior and ICRF power flow. Although typical sheath length scales (micrometers are much smaller than the wavelengths of fast (tens of cm and slow (millimeter waves excited by the antenna, sheath behavior near plasma-facing antenna components can be represented by a sub-grid kinetic sheath boundary condition, from which RF-rectified sheath potential variation over the surface is computed as a function of current flow and local plasma parameters near the wall. These local time-varying sheath potentials can then be used, in tandem with particle-in-cell (PIC models of the edge plasma, to study sputtering effects. Particle strike energies at the wall can be computed more accurately, consistent with their passage through the known potential of the sheath, such that correspondingly increased accuracy of sputtering yields and heat/particle fluxes to antenna surfaces is obtained. The new simulation capabilities enable time-domain modeling of plasma-surface interactions and ICRF physics in realistic experimental configurations at unprecedented spatial resolution. We will present results/animations from high-performance (10k-100k core FDTD/PIC simulations of Alcator C-Mod antenna operation.

  9. Axial magnetic field restriction of plasma sheath in a coaxial discharge

    International Nuclear Information System (INIS)

    Masoud, M. M.; Soliman, H. M.; Ibrahim, F. A.

    1999-01-01

    The study deals with the effect of an applied axial magnetic field on the dynamics and parameters of the plasma sheath and the expanded plasma in a coaxial discharge. Experimental investigations were carried out with a 3 kJ coaxial discharge device of a Mather geometry. The discharge takes place in Hydrogen gas with base pressure of 1 torr. The experiments were conducted with a 10 kV bank voltage, which corresponds to 100 kA discharge currents. The investigations have shown that the maximum axial plasma sheath velocity is decreased by 20% when applying the external axial magnetic field along the coaxial electrodes of intensity 2.6 kG. The experimental results of axial magnetic field intensity B z along the coaxial electrodes indicated that the application of external axial magnetic field causes an increases of B z ∼ 40% at a mid-distance between the breech and the muzzle and a decrease by 75% at the muzzle. The experimental results of expanded plasma electron temperature T e and density n e cleared that when the axial magnetic field is applied the maximum T e is decreased by 2.6 and 3 times, while the maximum n e is increased by 2.8 and 2 times for the first and second half cycles respectively. (author)

  10. Capillary-discharge sodium plasma for pulsed-power X-ray laser experiments

    International Nuclear Information System (INIS)

    Young, F.C.; Commisso, R.J.; Cooperstein, G.

    1986-01-01

    A capillary discharge plasma is being studied as a source of sodium plasma for Na/Ne x-ray laser experiments. The objective is to develop an intense x-ray pump of He-α emission from Na for matched-line photopumping of Ne. A uniform Na-bearing plasma (≅2-cm dia and ≅4-cm long) is to be injected into the anode-cathode gap of the Gamble II pulsed-power generator and imploded by MA-level currents to produce the intense sodium K-line radiation. Implosions of neon gas puffs have produced up to 50 GW of 0.92-keV He-α line emission, and similar x-ray power is expected from sodium implosions. Plasma from the capillary is produced by discharging current through an evacuated small hole in a plastic dielectric (≤ 3-mm dia and 1 to 2.5-cm long). A Na-bearing plasma is generated by forming the hole in NaF. Discharges of 30-kA (60-kA) peak current and 2-μs (2.6-μs) period are provided by a 0.6-μF (1.8-μF) capacitor bank charged to 25 kV. Diagnostics to evaluate plasma characteristics include witness plates, Faraday cups, photodiodes, open-shutter photographs, framing images, and visible light and near UV spectrographs. This plasma source emits visible light for 5-10 μs over a region extending - 1.5 cm from the capillary. Emission is more intense for capillary dia ≤ 0.8 mm. Spectroscopic measurements indicate that both positive ions and neutrals are present, including neutral Na from NaF capillaries. Velocities of≅2 cm/μs are deduced from Faraday cup measurements. For a 0.3-mm dia plastic capillary and 30-kA discharge current, ≅100 μg of capillary material is removed, which corresponds to≅10 μg/cm in the plasma

  11. Polyethylene Oxide Films Polymerized by Radio Frequency Plasma-Enhanced Chemical Vapour Phase Deposition and Its Adsorption Behaviour of Platelet-Rich Plasma

    International Nuclear Information System (INIS)

    Wen-Juan, Hu; Fen-Yan, Xie; Qiang, Chen; Jing, Weng

    2008-01-01

    We present polyethylene oxide (PEO) functional films polymerized by rf plasma-enhanced vapour chemical deposition (rf-PECVD) on p-Si (100) surface with precursor ethylene glycol dimethyl ether (EGDME) and diluted Ar in pulsed plasma mode. The influences of discharge parameters on the film properties and compounds are investigated. The film structure is analysed by Fourier transform infrared (FTIR) spectroscopy. The water contact angle measurement and atomic force microscope (AFM) are employed to examine the surface polarity and to detect surface morphology, respectively. It is concluded that the smaller duty cycle in pulsed plasma mode contributes to the rich C-O-C (EO) group on the surfaces. As an application, the adsorption behaviour of platelet-rich plasma on plasma polymerization films performed in-vitro is explored. The shapes of attached cells are studied in detail by an optic invert microscope, which clarifies that high-density C-O-C groups on surfaces are responsible for non-fouling adsorption behaviour of the PEO films

  12. Polyethylene Oxide Films Polymerized by Radio Frequency Plasma-Enhanced Chemical Vapour Phase Deposition and Its Adsorption Behaviour of Platelet-Rich Plasma

    Science.gov (United States)

    Hu, Wen-Juan; Xie, Fen-Yan; Chen, Qiang; Weng, Jing

    2008-10-01

    We present polyethylene oxide (PEO) functional films polymerized by rf plasma-enhanced vapour chemical deposition (rf-PECVD) on p-Si (100) surface with precursor ethylene glycol dimethyl ether (EGDME) and diluted Ar in pulsed plasma mode. The influences of discharge parameters on the film properties and compounds are investigated. The film structure is analysed by Fourier transform infrared (FTIR) spectroscopy. The water contact angle measurement and atomic force microscope (AFM) are employed to examine the surface polarity and to detect surface morphology, respectively. It is concluded that the smaller duty cycle in pulsed plasma mode contributes to the rich C-O-C (EO) group on the surfaces. As an application, the adsorption behaviour of platelet-rich plasma on plasma polymerization films performed in-vitro is explored. The shapes of attached cells are studied in detail by an optic invert microscope, which clarifies that high-density C-O-C groups on surfaces are responsible for non-fouling adsorption behaviour of the PEO films.

  13. Two-stage plasma gun based on a gas discharge with a self-heating hollow emitter.

    Science.gov (United States)

    Vizir, A V; Tyunkov, A V; Shandrikov, M V; Oks, E M

    2010-02-01

    The paper presents the results of tests of a new compact two-stage bulk gas plasma gun. The plasma gun is based on a nonself-sustained gas discharge with an electron emitter based on a discharge with a self-heating hollow cathode. The operating characteristics of the plasma gun are investigated. The discharge system makes it possible to produce uniform and stable gas plasma in the dc mode with a plasma density up to 3x10(9) cm(-3) at an operating gas pressure in the vacuum chamber of less than 2x10(-2) Pa. The device features high power efficiency, design simplicity, and compactness.

  14. Two-stage plasma gun based on a gas discharge with a self-heating hollow emitter

    International Nuclear Information System (INIS)

    Vizir, A. V.; Tyunkov, A. V.; Shandrikov, M. V.; Oks, E. M.

    2010-01-01

    The paper presents the results of tests of a new compact two-stage bulk gas plasma gun. The plasma gun is based on a nonself-sustained gas discharge with an electron emitter based on a discharge with a self-heating hollow cathode. The operating characteristics of the plasma gun are investigated. The discharge system makes it possible to produce uniform and stable gas plasma in the dc mode with a plasma density up to 3x10 9 cm -3 at an operating gas pressure in the vacuum chamber of less than 2x10 -2 Pa. The device features high power efficiency, design simplicity, and compactness.

  15. Breakdown transient study of plasma distributions in a 2.45 GHz hydrogen discharge

    Energy Technology Data Exchange (ETDEWEB)

    Cortázar, O.D., E-mail: daniel.cortazar@uclm.es [Universidad de Castilla-La Mancha, ETSII-INEI, Applied Mechanics and Projects Department, C.J. Cela s/n, 13170 Ciudad Real (Spain); Megía-Macías, A. [ESS Bilbao Consortium, Polígono Ugaldeguren-III Pol. A 7B, 48170-Zamudio, Vizcaya (Spain); Tarvainen, O.; Koivisto, H. [University of Jyväskylä, Department of Physics, PO Box 35 (YFL), 40500 Jyväskylä (Finland)

    2015-05-01

    Plasma distribution transients associated with the breakdown of a 2.45 GHz hydrogen discharge similar to high current microwave ion sources are studied by means of an ultra-fast frame image acquisition system in visible light range. Eight different plasma distributions have been studied by photographing the 2D projections of the discharge through a transparent plasma electrode. The temporal evolution of images in Balmer-alpha and Fulcher band wavelengths have been recorded associated to atomic and molecular excitation and ionization processes. Some unexpected plasma distributions transient behaviors during breakdown are reported.

  16. Dielectric barrier discharge plasma actuator for flow control

    Science.gov (United States)

    Opaits, Dmitry Florievich

    Electrohydrodynamic (EHD) and magnetohydrodynamic phenomena are being widely studied for aerodynamic applications. The major effects of these phenomena are heating of the gas, body force generation, and enthalpy addition or extraction, [1, 2, 3]. In particular, asymmetric dielectric barrier discharge (DBD) plasma actuators are known to be effective EHD device in aerodynamic control, [4, 5]. Experiments have demonstrated their effectiveness in separation control, acoustic noise reduction, and other aeronautic applications. In contrast to conventional DBD actuators driven by sinusoidal voltages, we proposed and used a voltage profile consisting of nanosecond pulses superimposed on dc bias voltage. This produces what is essentially a non-self-sustained discharge: the plasma is generated by repetitive short pulses, and the pushing of the gas occurs primarily due to the bias voltage. The advantage of this non-self-sustained discharge is that the parameters of ionizing pulses and the driving bias voltage can be varied independently, which adds flexibility to control and optimization of the actuators performance. Experimental studies were conducted of a flow induced in a quiescent room air by a single DBD actuator. A new approach for non-intrusive diagnostics of plasma actuator induced flows in quiescent gas was proposed, consisting of three elements coupled together: the Schlieren technique, burst mode of plasma actuator operation, and 2-D numerical fluid modeling. During the experiments, it was found that DBD performance is severely limited by surface charge accumulation on the dielectric. Several ways to mitigate the surface charge were found: using a reversing DC bias potential, three-electrode configuration, slightly conductive dielectrics, and semi conductive coatings. Force balance measurements proved the effectiveness of the suggested configurations and advantages of the new voltage profile (pulses+bias) over the traditional sinusoidal one at relatively low

  17. Improvement of In-Flight Alumina Spheroidization Process Using a Small Power Argon DC-RF Hybrid Plasma Flow System by Helium Mixture

    Science.gov (United States)

    Takana, Hidemasa; Jang, Juyong; Igawa, Junji; Nakajima, Tomoki; Solonenko, Oleg P.; Nishiyama, Hideya

    2011-03-01

    For the further improvement of in-flight alumina spheroidization process with a low-power direct-current radiofrequency (DC-RF) hybrid plasma flow system, the effect of a small amount of helium gas mixture in argon main gas and also the effect of increasing DC nozzle diameter on powder spheroidization ratio have been experimentally clarified with correlating helium gas mixture percentage, plasma enthalpy, powder in-flight velocity, and temperature. The alumina spheroidization ratio increases by helium gas mixture as a result of enhancement of plasma enthalpy. The highest spheroidization ratio is obtained by 4% mixture of helium in central gas with enlarging nozzle diameter from 3 to 4 mm, even under the constant low input electric power given to a DC-RF hybrid plasma flow system.

  18. Titanium dioxide (TIO2) thin film and plasma properties in RF magnetron sputtering

    International Nuclear Information System (INIS)

    Ali, Riyaz Ahmad Mohamed; Nayan, Nafarizal

    2013-01-01

    Lately, titanium dioxide (TiO 2 ) films with anatase crystalline property received numerous attentions as unique material properties. There are wide applications of TiO 2 thin film such as for photocatalytic application in solar cell. In the present study, radio frequency (RF) magnetron sputtering technique has been used to produce high dense, homogeneously controllable film layer at low deposition temperature using titanium (Ti) target. The diameter of the Ti target is 3 inch with fixed discharge power of 400W. Magnetron sputtering plasma has been produced in high purity 99.99% Argon (Ar) and 99.99% Oxygen (O 2 ) environment pressure ranging from 5 to 20 mTorr. The TiO2 were growth on silicon and glass substrates. Substrate temperature during deposition was kept constant at 400°C. The distance between target and substrate holder was maintain at 14 cm with rotation of 10 rotation-per-minutes. Our X-ray diffraction result, shows anatase crystalline successfully formed with characterization peaks of plane (101) at 2θ = 25.28°, plane (202) at 2θ = 48.05° and plane (211) at 2θ = 55.06°. In addition, it is our interest to study the plasma properties and optical spectrum of Ti, Ti+ , O- , ArM and Ar+ in the chamber during the deposition process. Result of emission line intensities, electron density and temperature from optical spectroscope and Langmuir probe will be discuss further during the workshop. This works were supported by Graduate Incentive Scheme of Universiti Tun Hussein Onn Malaysia (UTHM) and Fundamental Research Grant Scheme of Ministry of Higher Education, Malaysia. (author)

  19. Surface modification by preparation of buffer zone in glow-discharge plasma

    International Nuclear Information System (INIS)

    Cho, D.L.

    1986-01-01

    Reactive species, energetic particles, and uv radiation in the plasma created by a glow discharge strongly interact with solid surfaces under the influence of the plasma. As a result of the strong interaction, various physical and chemical reactions, unique and advantageous for the surface modification of solid materials, occur on the solid surfaces. The surface modification is carried out through formation of a thin buffering layer on the solid surface. The preparation of a buffer zone on solid surfaces for surface modification is described. Two kinds of a buffer zone are prepared by plasma polymerization, or simultaneous sputter deposition of electrode material with plasma polymerization: a transitional buffer zone and a graded buffer zone. Important factors for preparation of the buffer zone (pre-conditioning of a substrate surface, thin-film deposition, post-treatment of the film, magnetron discharge, energy input, geometry of a substrate and a plasma) are discussed

  20. Equilibrium and stability of a toroidal-sector plasma discharge in an EXTRAP configuration

    International Nuclear Information System (INIS)

    Drake, J.R.

    1982-02-01

    Experimental studies of the equilibrium and stability of a sector of a toroidal EXTRAP plasma discharge have been studied. The high β plasma discharge, which had an Alfven transit time about 0.5 μsec, could be positioned in a stable equilibrium for the 300μsec time scale of the experiment. (author)

  1. Detection of negative ions in glow discharge mass spectrometry for analysis of solid specimens

    DEFF Research Database (Denmark)

    Canulescu, Stela; Molchan, Igor S.; Tauziede, C.

    2010-01-01

    A new method is presented for elemental and molecular analysis of halogen-containing samples by glow discharge time-of-flight mass spectrometry, consisting of detection of negative ions from a pulsed RF glow discharge in argon. Analyte signals are mainly extracted from the afterglow regime...... be used to study the distribution of a tantalum fluoride layer within the anodized tantala layer. Further, comparison is made with data obtained using glow-discharge optical emission spectroscopy, where elemental fluorine can only be detected using a neon plasma. The ionization mechanisms responsible...... for the formation of negative ions in glow discharge time-of-flight mass spectrometry are briefly discussed....

  2. Collisional and radiative processes in high-pressure discharge plasmas

    Science.gov (United States)

    Becker, Kurt H.; Kurunczi, Peter F.; Schoenbach, Karl H.

    2002-05-01

    Discharge plasmas at high pressures (up to and exceeding atmospheric pressure), where single collision conditions no longer prevail, provide a fertile environment for the experimental study of collisions and radiative processes dominated by (i) step-wise processes, i.e., the excitation of an already excited atomic/molecular state and by (ii) three-body collisions leading, for instance, to the formation of excimers. The dominance of collisional and radiative processes beyond binary collisions involving ground-state atoms and molecules in such environments allows for many interesting applications of high-pressure plasmas such as high power lasers, opening switches, novel plasma processing applications and sputtering, absorbers and reflectors for electromagnetic waves, remediation of pollutants and waste streams, and excimer lamps and other noncoherent vacuum-ultraviolet light sources. Here recent progress is summarized in the use of hollow cathode discharge devices with hole dimensions in the range 0.1-0.5 mm for the generation of vacuum-ultraviolet light.

  3. Polymerization of phenol by using discharged plasma under hydrothermal state

    Energy Technology Data Exchange (ETDEWEB)

    Mitsugi, M; Yoshida, A; Watanabe, H; Kiyan, T; Takade, M; Miyaji, K; Kuwahara, Y; Akiyama, H; Hara, M; Sasaki, M [Graduate School of Science and Technology, Kumamoto University (Japan); Namihira, T; Goto, M, E-mail: mgoto@kumamoto-u.ac.j [Bioelectrics Research Center, Kumamoto University 2-39-1 Kurokami, Kumamoto 865-8555 Japan (Japan)

    2010-03-01

    Supercritical fluid with plasma is a type of green processing media because this technique does not use catalyst and toxic solvents. In this study, we carried out experiments of organic materials in the presence of discharged plasma in sub- and supercritical water to evaluate the possibility for new reactions. For this purpose, we used SUS316 reactor that generates plasma at temperature and pressure up to 573K and 30MPa, respectively. 100 mmol/L aqueous phenol solution was used as starting material. The reactions were carried out at temperature of 523K and under pressure of 25MPa. After a series of reactions, water-soluble, water-insoluble (oily products), solid residue and gaseous product were obtained. For the analysis of these products, HPLC, GC-MS, TOC, GC-TCD and TOF-MS were used. The highest phenol conversion was 16.96% obtained at 523K, 25MPa and with 4000 times discharged plasma. Polymerized phenol was obtained as a product.

  4. Polymerization of phenol by using discharged plasma under hydrothermal state

    International Nuclear Information System (INIS)

    Mitsugi, M; Yoshida, A; Watanabe, H; Kiyan, T; Takade, M; Miyaji, K; Kuwahara, Y; Akiyama, H; Hara, M; Sasaki, M; Namihira, T; Goto, M

    2010-01-01

    Supercritical fluid with plasma is a type of green processing media because this technique does not use catalyst and toxic solvents. In this study, we carried out experiments of organic materials in the presence of discharged plasma in sub- and supercritical water to evaluate the possibility for new reactions. For this purpose, we used SUS316 reactor that generates plasma at temperature and pressure up to 573K and 30MPa, respectively. 100 mmol/L aqueous phenol solution was used as starting material. The reactions were carried out at temperature of 523K and under pressure of 25MPa. After a series of reactions, water-soluble, water-insoluble (oily products), solid residue and gaseous product were obtained. For the analysis of these products, HPLC, GC-MS, TOC, GC-TCD and TOF-MS were used. The highest phenol conversion was 16.96% obtained at 523K, 25MPa and with 4000 times discharged plasma. Polymerized phenol was obtained as a product.

  5. Influence of the configuration of the magnetic filter field on the discharge structure in the RF driven negative ion source prototype for fusion

    Science.gov (United States)

    Lishev, S.; Schiesko, L.; Wünderlich, D.; Fantz, U.

    2017-08-01

    The study provides results for the influence of the filter field topology on the plasma parameters in the RF prototype negative ion source for ITER NBI. A previously developed 2D fluid plasma model of the prototype source was extended towards accounting for the particles and energy losses along the magnetic field lines and the presence of a magnetic field in the driver which is the case at the BATMAN and ELISE test-beds. The effect of the magnetic field in the driver is shown for the magnetic field configuration of the prototype source (i.e. a magnetic field produced by an external magnet frame) by comparison of plasma parameters without and with the magnetic field in the driver and for different axial positions of the filter. Since the ELISE-like magnetic field (i.e. a magnetic field produced by a current flowing through the plasma grid) is a new feature planned to be installed at the BATMAN test-bed, its effect on the discharge structure was studied for different strengths of the magnetic field. The obtained results show for both configurations of the magnetic filter the same main features in the patterns of the plasma parameters in the expansion chamber: a strong axial drop of the electron temperature and the formation of a groove accompanied with accumulation of electrons in front of the plasma grid. The presence of a magnetic field in the driver has a local impact on the plasma parameters: the formation of a second groove of the electron temperature in the case of BATMAN (due to the reversed direction of the filter field in the driver) and a strong asymmetry of the electron density. Accounting for the additional losses in the third dimension suppresses the drifts across the magnetic field and, thus, the variations of the electron density in the expansion chamber are less pronounced.

  6. Discharge cleaning on KSTAR 1st plasma events

    Energy Technology Data Exchange (ETDEWEB)

    Kwak, J. G.; Wang, J. S. [Korea Atomic Energy Research Institute, Daejeon (Korea, Republic of); Kim, J. S.; Yang, H. L.; Kim, K. P.; Kim, K. M. [National Fusion Research Institute, Daejeon (Korea, Republic of)

    2008-10-15

    A discharge cleaning of a vacuum vessel was conducted with a GDC (Glow discharge cleaning) and a ICRF-DC(ICRF assisted discharge cleaning) for the KSTAR first plasma event period. The base pressure of the vessel was kept below 10-7 mbar via a cool down of the cryo-vessel, a 100C baking, and a GDC. (Partial pressure of hydrogen and nitrogen is below 10-8 mbar). The diagnostics for a discharge cleaning is a differential pumped RGA attached to a pumping duct and a cold cathode and a hot cathode gauge attached to the vessel and the pumping duct respectively. To analyze the discharge characteristics, a microwave interferometer, Bremsstahlung, H-alphas and a TV camera were used. Two straps among the four straps of the ICRF antenna are used for the ICRF-DC and ICRF heating experiments. The phase difference between the adjacent straps was 0 degree and the operating frequency was 30-33MHz.

  7. Second derivative Langmuir probe diagnostics of gas discharge plasma at intermediate pressures (review article)

    International Nuclear Information System (INIS)

    Popov, Tsv K; Dimitrova, M; Dias, F M; Tsaneva, V N; Stelmashenko, N A; Blamire, M G; Barber, Z H

    2006-01-01

    The second-derivative Langmuir probe method for precise determination of the plasma potential, the electron energy distribution function (respectively the electron temperature,) and the electron density of gas discharge plasma at intermediate pressures (100-1000 Pa) is reviewed. Results of applying the procedure proposed to different kinds of gas discharges are presented. Factors affecting the accuracy of the plasma characteristics evaluated are discussed

  8. Study of discharge in quiescent plasma machine of the INPE

    International Nuclear Information System (INIS)

    Ferreira, J.G.; Ferreira, J.L.; Ludwig, G.O.; Maciel, H.S.

    1988-12-01

    Measurements of principal plasma parameters produced by quiescent plasma machine of the Instituto de Pesquisas Espaciais (INPE) for current of 500 mA and several values of pressure and discharge power are presented. A qualitative interpretation for obtained results is done and a simple model for plasma density is compared with experimental values. The conditions of cathode operation are also investigated. (M.C.K.)

  9. Control of Reactive Species Generated by Low-frequency Biased Nanosecond Pulse Discharge in Atmospheric Pressure Plasma Effluent

    Science.gov (United States)

    Takashima, Keisuke; Kaneko, Toshiro

    2016-09-01

    The control of hydroxyl radical and the other gas phase species generation in the ejected gas through air plasma (air plasma effluent) has been experimentally studied, which is a key to extend the range of plasma treatment. Nanosecond pulse discharge is known to produce high reduced electric field (E/N) discharge that leads to efficient generation of the reactive species than conventional low frequency discharge, while the charge-voltage cycle in the low frequency discharge is known to be well-controlled. In this study, the nanosecond pulse discharge biased with AC low frequency high voltage is used to take advantages of these discharges, which allows us to modulate the reactive species composition in the air plasma effluent. The utilization of the gas-liquid interface and the liquid phase chemical reactions between the modulated long-lived reactive species delivered from the air plasma effluent could realize efficient liquid phase chemical reactions leading to short-lived reactive species production far from the air plasma, which is crucial for some plasma agricultural applications.

  10. Low pressure plasma discharges for the sterilization and decontamination of surfaces

    International Nuclear Information System (INIS)

    Rossi, F; Rauscher, H; Hasiwa, M; Gilliland, D; Kylian, O

    2009-01-01

    The mechanisms of sterilization and decontamination of surfaces are compared in direct and post discharge plasma treatments in two low-pressure reactors, microwave and inductively coupled plasma. It is shown that the removal of various biomolecules, such as proteins, pyrogens or peptides, can be obtained at high rates and low temperatures in the inductively coupled plasma (ICP) by using Ar/O 2 mixtures. Similar efficiency is obtained for bacterial spores. Analysis of the discharge conditions illustrates the role of ion bombardment associated with O radicals, leading to a fast etching of organic matter. By contrast, the conditions obtained in the post discharge lead to much lower etching rates but also to a chemical modification of pyrogens, leading to their de-activation. The advantages of the two processes are discussed for the application to the practical case of decontamination of medical devices and reduction of hospital infections, illustrating the advantages and drawbacks of the two approaches.

  11. Low pressure plasma discharges for the sterilization and decontamination of surfaces

    Energy Technology Data Exchange (ETDEWEB)

    Rossi, F; Rauscher, H; Hasiwa, M; Gilliland, D [European Commission, Joint Research Centre, Institute for Health and Consumer Protection, Via E. Fermi 2749, 21027 Ispra (Vatican City State, Holy See) (Italy); Kylian, O [Faculty of Mathematics and Physics, Charles University, V Holesovickach 2, Prague 8, 180 00 (Czech Republic)], E-mail: francois.rossi@jrc.ec.europa.eu

    2009-11-15

    The mechanisms of sterilization and decontamination of surfaces are compared in direct and post discharge plasma treatments in two low-pressure reactors, microwave and inductively coupled plasma. It is shown that the removal of various biomolecules, such as proteins, pyrogens or peptides, can be obtained at high rates and low temperatures in the inductively coupled plasma (ICP) by using Ar/O{sub 2} mixtures. Similar efficiency is obtained for bacterial spores. Analysis of the discharge conditions illustrates the role of ion bombardment associated with O radicals, leading to a fast etching of organic matter. By contrast, the conditions obtained in the post discharge lead to much lower etching rates but also to a chemical modification of pyrogens, leading to their de-activation. The advantages of the two processes are discussed for the application to the practical case of decontamination of medical devices and reduction of hospital infections, illustrating the advantages and drawbacks of the two approaches.

  12. Theoretical and experimental studies of a planar inductive coupled rf plasma source as the driver in simulator facility (ISTAPHM) of interactions of waves with the edge plasma on tokamaks

    Science.gov (United States)

    Ghanei, V.; Nasrabadi, M. N.; Chin, O.-H.; Jayapalan, K. K.

    2017-11-01

    This research aims to design and build a planar inductive coupled RF plasma source device which is the driver of the simulator project (ISTAPHM) of the interactions between ICRF Antenna and Plasma on tokamak by using the AMPICP model. For this purpose, a theoretical derivation of the distribution of the RF magnetic field in the plasma-filled reactor chamber is presented. An experimental investigation of the field distributions is described and Langmuir measurements are developed numerically. A comparison of theory and experiment provides an evaluation of plasma parameters in the planar ICP reactor. The objective of this study is to characterize the plasma produced by the source alone. We present the results of the first analysis of the plasma characteristics (plasma density, electron temperature, electron-ion collision frequency, particle fluxes and their velocities, stochastic frequency, skin depth and electron energy distribution functions) as function of the operating parameters (injected power, neutral pressure and magnetic field) as measured with fixed and movable Langmuir probes. The plasma is currently produced only by the planar ICP. The exact goal of these experiments is that the produced plasma by external source can exist as a plasma representative of the edge of tokamaks.

  13. Modeling of polarization phenomena due to RF sheaths and electron beams in magnetized plasma; Modelisation de phenomenes de polarisation par des gaines rf et des faisceaux electroniques dans un plasma magnetise

    Energy Technology Data Exchange (ETDEWEB)

    Faudot, E

    2005-07-01

    This work investigates the problematic of hot spots induced by accelerated particle fluxes in tokamaks. It is shown that the polarization due to sheaths in the edge plasma in which an electron beam at a high level of energy is injected, can reach several hundreds volts and thus extend the deposition area. The notion of obstructed sheath is introduced and explains the acceleration of energy deposition by the decreasing of the sheath potential. Then, a 2-dimensional fluid modeling of flux tubes in front of ICRF antennae allows us to calculate the rectified potentials taking into account RF polarization currents transverse to magnetic field lines. The 2-dimensional fluid code designed validates the analytical results which show that the DC rectified potential is 50% greater with polarization currents than without. Finally, the simultaneous application of an electron beam and a RF potential reveals that the potentials due to each phenomenon are additives when RF potential is much greater than beam polarization. The density depletion of polarized flux tubes in 2-dimensional PIC (particles in cells) simulations is characterized but not yet explained. (author)

  14. EUV emission from Kr and Xe capillary discharge plasmas

    International Nuclear Information System (INIS)

    Juschkin, L.; Ellwi, S.; Kunze, H-J.; Chuvatin, A.; Zakharov, S.V.

    2002-01-01

    Kr and Xe plasmas are very intensive emitters in the spectral range of 100-150 A, which is relevant for a number of applications (for example microlithography). We present investigations of the extreme utraviolet (EUV) emission from a slow capillary discharge with Kr and Xe fillings. The emission of Kr ions (Kr VIII to Kr XI) within the range of 70-150 A consists of three bands of lines of about 10 A width with maxima at 116, 103 and 86 A. Xe emission bands of about 15 A width have their maxima at 136 and 115 A (Xe IX to Xe XII). The radiation duration in this spectral range is ∼150 ns for both elements. At the optimum conditions, the Kr emission at 103 A is 2-3 times more intense than the Xe emission at 136 A. The measured spectral energy of Kr radiation is about 0.1 J sr -1 A -1 . Experimental results are compared with numerical modellings of the dynamics and emission of the capillary discharge plasma, which enables the determination of plasma parameters and the future use of the codes as additional instruments for plasma diagnostics. (author)

  15. Parallel simulation of radio-frequency plasma discharges

    International Nuclear Information System (INIS)

    Fivaz, M.; Howling, A.; Ruegsegger, L.; Schwarzenbach, W.; Baeumle, B.

    1994-01-01

    The 1D Particle-In-Cell and Monte Carlo collision code XPDP1 is used to model radio-frequency argon plasma discharges. The code runs faster on a single-user parallel system called MUSIC than on a CRAY-YMP. The low cost of the MUSIC system allows a 24-hours-per-day use and the simulation results are available one to two orders of magnitude quicker than with a super computer shared with other users. The parallelization strategy and its implementation are discussed. Very good agreement is found between simulation results and measurements done in an experimental argon discharge. (author) 2 figs., 3 refs

  16. An analytical theory of corona discharge plasmas

    International Nuclear Information System (INIS)

    Uhm, H.S.; Lee, W.M.

    1997-01-01

    In this paper we describe an analytical investigation of corona discharge systems. Electrical charge and the energy transfer mechanism are investigated based on the circuit analysis. Efficient delivery of electrical energy from the external circuit to the reactor chamber is a major issue in design studies. The optimum condition obtained in this paper ensures 100% energy transfer. Second-order coupled differential equations are numerically solved. All the analytical results agree remarkably well with numerical data. The reactor capacitor plays a pivotal role in circuit performance. The voltage profile is dominated by the reactor capacitor. Corona discharge properties in the reactor chamber are also investigated, assuming that a specified voltage profile V(t) is fed through the inner conductor. The analytical description is based on the electron moment equation. Defining the plasma breakdown parameter u=V/R c p, plasma is generated for a high-voltage pulse satisfying u>u c , where u c is the critical breakdown parameter defined by geometrical configuration. Here, u is in units of a million volts per m per atm, and R c is the outer conductor radius. It is found that the plasma density profile generated inside the reactor chamber depends very sensitively on the system parameters. A small change of a physical parameter can easily lead to a density change in one order of magnitude

  17. Simulation of the Plasma Afterglow in the Discharge Gap of a Subnanosecond Switch Based on an Open Discharge in Helium

    Science.gov (United States)

    Alexandrov, A. L.; Schweigert, I. V.

    2018-05-01

    The phenomenon of subnanosecond electrical breakdown in a strong electric field observed in an open discharge in helium at pressures of 6-20 Torr can be used to create ultrafast plasma switches triggering into a conducting state for a time shorter than 1 ns. To evaluate the possible repetition rate of such a subnanosecond switch, it is interesting to study the decay dynamics of the plasma remaining in the discharge gap after ultrafast breakdown. In this paper, a kinetic model based on the particle-in-cell Monte Carlo collision method is used to study the dynamics of the plasma afterglow in the discharge gap of a subnanosecond switch operating with helium at a pressure of 6 Torr. The simulation results show that the radiative, collisional-radiative, and three-body collision recombination mechanisms significantly contribute to the afterglow decay only while the plasma density remains higher than 1012 cm-3; the main mechanism of the further plasma decay is diffusion of plasma particles onto the wall. Therefore, the effect of recombination in the plasma bulk is observed only during the first 10-20 μs of the afterglow. Over nearly the same time, plasma electrons become thermalized. The afterglow time can be substantially reduced by applying a positive voltage U c to the cathode. Since diffusive losses are limited by the ion mobility, the additional ion drift toward the wall significantly accelerates plasma decay. As U c increases from 0 to +500 V, the characteristic time of plasma decay is reduced from 35 to 10 μs.

  18. Magnetic fields and uniformity of radio frequency power deposition in low-frequency inductively coupled plasmas with crossed internal oscillating currents

    DEFF Research Database (Denmark)

    Tsakadze, Erekle; Ostrikov, K.N.; Tsakadze, Z.L.

    2004-01-01

    ) discharge modes using two miniature magnetic probes. It is shown that the radial uniformity and depth of the rf power deposition can be improved as compared with conventional sources of inductively coupled plasmas with external flat spiral ("pancake") antennas. Relatively deeper rf power deposition...... in the plasma source results in more uniform profiles of the optical emission intensity, which indicates on the improvement of the plasma uniformity over large chamber volumes. The results of the numerical modeling of the radial magnetic field profiles are found in a reasonable agreement with the experimental...

  19. Iterative Addition of Kinetic Effects to Cold Plasma RF Wave Solvers

    Science.gov (United States)

    Green, David; Berry, Lee; RF-SciDAC Collaboration

    2017-10-01

    The hot nature of fusion plasmas requires a wave vector dependent conductivity tensor for accurate calculation of wave heating and current drive. Traditional methods for calculating the linear, kinetic full-wave plasma response rely on a spectral method such that the wave vector dependent conductivity fits naturally within the numerical method. These methods have seen much success for application to the well-confined core plasma of tokamaks. However, quantitative prediction of high power RF antenna designs for fusion applications has meant a requirement of resolving the geometric details of the antenna and other plasma facing surfaces for which the Fourier spectral method is ill-suited. An approach to enabling the addition of kinetic effects to the more versatile finite-difference and finite-element cold-plasma full-wave solvers was presented by where an operator-split iterative method was outlined. Here we expand on this approach, examine convergence and present a simplified kinetic current estimator for rapidly updating the right-hand side of the wave equation with kinetic corrections. This research used resources of the Oak Ridge Leadership Computing Facility at the Oak Ridge National Laboratory, which is supported by the Office of Science of the U.S. Department of Energy under Contract No. DE-AC05-00OR22725.

  20. Plasma Perturbations in High-Speed Probing of Hall Thruster Discharge Chambers: Quantification and Mitigation

    Science.gov (United States)

    Jorns, Benjamin A.; Goebel, Dan M.; Hofer, Richard R.

    2015-01-01

    An experimental investigation is presented to quantify the effect of high-speed probing on the plasma parameters inside the discharge chamber of a 6-kW Hall thruster. Understanding the nature of these perturbations is of significant interest given the importance of accurate plasma measurements for characterizing thruster operation. An array of diagnostics including a high-speed camera and embedded wall probes is employed to examine in real time the changes in electron temperature and plasma potential induced by inserting a high-speed reciprocating Langmuir probe into the discharge chamber. It is found that the perturbations onset when the scanning probe is downstream of the electron temperature peak, and that along channel centerline, the perturbations are best characterized as a downstream shift of plasma parameters by 15-20% the length of the discharge chamber. A parametric study is performed to investigate techniques to mitigate the observed probe perturbations including varying probe speed, probe location, and operating conditions. It is found that the perturbations largely disappear when the thruster is operated at low power and low discharge voltage. The results of this mitigation study are discussed in the context of recommended methods for generating unperturbed measurements of the discharge chamber plasma.

  1. Theoretical investigation of phase-controlled bias effect in capacitively coupled plasma discharges

    International Nuclear Information System (INIS)

    Kwon, Deuk-Chul; Yoon, Jung-Sik

    2011-01-01

    We theoretically investigated the effect of phase difference between powered electrodes in capacitively coupled plasma (CCP) discharges. Previous experimental result has shown that the plasma potential could be controlled by using a phase-shift controller in CCP discharges. In this work, based on the previously developed radio frequency sheath models, we developed a circuit model to self-consistently determine the bias voltage from the plasma parameters. Results show that the present theoretical model explains the experimental results quite well and there is an optimum value of the phase difference for which the V dc /V pp ratio becomes a minimum.

  2. Time-dependent simulation of plasma and electrodes in high-intensity discharge lamps with different electrode shapes

    CERN Document Server

    Flesch, P

    2003-01-01

    The subject of this paper is the modelling of d.c. and a.c. high-intensity Hg-discharge lamps with differently shaped electrodes. Different arc attachments on the electrodes are studied and insight for the development of new electrodes is gained. The model includes the entire discharge plasma (plasma column, hot plasma spots in front of electrodes, near-electrode non-LTE-plasma) as well as anode and cathode. No subdivision of the discharge space into different regions is necessary (like space charge layer, ionization zone, plasma column). This is achieved by using a differential equation for a non-LTE electrical conductivity which is applicable for local thermal equilibrium (LTE-)regions as well as for non-LTE plasma regions close to the electrodes in a high pressure plasma. Modelling results for a 0.6 MPa mercury discharge considering six different electrode shapes (anode and cathode) are presented and compared with experimental results. The electrodes have different diameters and different electrode tips, s...

  3. The effects of low-temperature plasma treatment on the capillary properties of inorganic fibers

    Science.gov (United States)

    Garifullin, A. R.; Abdullin, I. Sh; Skidchenko, E. A.; Krasina, I. V.; Shaekhov, M. F.

    2016-01-01

    Solving the problem of achieving high adhesion between the components in the polymeric composite material (PCM) based on carbon fibers (CF) and basalt fibers (BF) is proposed to use the radio-frequency (RF) plasma under lower pressure by virtue of efficiency, environmental friendliness and rationality of the method. The paper gives the results of studies of the properties of CF and BF after RF capacitive discharge plasma treatment. The plasma modification modes of carbon and basalt fiber were investigated. The efficiency of treatment tool in surface properties modification of carbon and basalt fibers was found, namely capillary properties of CF and BF were researched. The optimal treatment modes were selected. It was found that the method of plasma modification in the radio-frequency capacitive discharge under the lower pressure contributes enhancing the capillary properties of inorganic fibers, in particular carbon and basalt ones. It shows the tendency to increase of the adhesive properties in PCM, and, consequently, the increase of the physical and mechanical properties of the products.

  4. The effects of low-temperature plasma treatment on the capillary properties of inorganic fibers

    International Nuclear Information System (INIS)

    Garifullin, A R; Abdullin, I Sh; Skidchenko, E A; Krasina, I V; Shaekhov, M F

    2016-01-01

    Solving the problem of achieving high adhesion between the components in the polymeric composite material (PCM) based on carbon fibers (CF) and basalt fibers (BF) is proposed to use the radio-frequency (RF) plasma under lower pressure by virtue of efficiency, environmental friendliness and rationality of the method. The paper gives the results of studies of the properties of CF and BF after RF capacitive discharge plasma treatment. The plasma modification modes of carbon and basalt fiber were investigated. The efficiency of treatment tool in surface properties modification of carbon and basalt fibers was found, namely capillary properties of CF and BF were researched. The optimal treatment modes were selected. It was found that the method of plasma modification in the radio-frequency capacitive discharge under the lower pressure contributes enhancing the capillary properties of inorganic fibers, in particular carbon and basalt ones. It shows the tendency to increase of the adhesive properties in PCM, and, consequently, the increase of the physical and mechanical properties of the products. (paper)

  5. Battery-powered pulsed high density inductively coupled plasma source for pre-ionization in laboratory astrophysics experiments.

    Science.gov (United States)

    Chaplin, Vernon H; Bellan, Paul M

    2015-07-01

    An electrically floating radiofrequency (RF) pre-ionization plasma source has been developed to enable neutral gas breakdown at lower pressures and to access new experimental regimes in the Caltech laboratory astrophysics experiments. The source uses a customized 13.56 MHz class D RF power amplifier that is powered by AA batteries, allowing it to safely float at 3-6 kV with the electrodes of the high voltage pulsed power experiments. The amplifier, which is capable of 3 kW output power in pulsed (<1 ms) operation, couples electrical energy to the plasma through an antenna external to the 1.1 cm radius discharge tube. By comparing the predictions of a global equilibrium discharge model with the measured scalings of plasma density with RF power input and axial magnetic field strength, we demonstrate that inductive coupling (rather than capacitive coupling or wave damping) is the dominant energy transfer mechanism. Peak ion densities exceeding 5 × 10(19) m(-3) in argon gas at 30 mTorr have been achieved with and without a background field. Installation of the pre-ionization source on a magnetohydrodynamically driven jet experiment reduced the breakdown time and jitter and allowed for the creation of hotter, faster argon plasma jets than was previously possible.

  6. Effect of actuating voltage and discharge gap on plasma assisted detonation initiation process

    Science.gov (United States)

    Siyin, ZHOU; Xueke, CHE; Wansheng, NIE; Di, WANG

    2018-06-01

    The influence of actuating voltage and discharge gap on plasma assisted detonation initiation by alternating current dielectric barrier discharge was studied in detail. A loose coupling method was used to simulate the detonation initiation process of a hydrogen–oxygen mixture in a detonation tube under different actuating voltage amplitudes and discharge gap sizes. Both the discharge products and the detonation forming process assisted by the plasma were analyzed. It was found that the patterns of the temporal and spatial distributions of discharge products in one cycle keep unchanged as changing the two discharge operating parameters. However, the adoption of a higher actuating voltage leads to a higher active species concentration within the discharge zone, and atom H is the most sensitive to the variations of the actuating voltage amplitude among the given species. Adopting a larger discharge gap results in a lower concentration of the active species, and all species have the same sensitivity to the variations of the gap. With respect to the reaction flow of the detonation tube, the corresponding deflagration to detonation transition (DDT) time and distance become slightly longer when a higher actuating voltage is chosen. The acceleration effect of plasma is more prominent with a smaller discharge gap, and the benefit builds gradually throughout the DDT process. Generally, these two control parameters have little effect on the amplitude of the flow field parameters, and they do not alter the combustion degree within the reaction zone.

  7. Model polymer etching and surface modification by a time modulated RF plasma jet: role of atomic oxygen and water vapor

    Science.gov (United States)

    Luan, P.; Knoll, A. J.; Wang, H.; Kondeti, V. S. S. K.; Bruggeman, P. J.; Oehrlein, G. S.

    2017-01-01

    The surface interaction of a well-characterized time modulated radio frequency (RF) plasma jet with polystyrene, poly(methyl methacrylate) and poly(vinyl alcohol) as model polymers is investigated. The RF plasma jet shows fast polymer etching but mild chemical modification with a characteristic carbonate ester and NO formation on the etched surface. By varying the plasma treatment conditions including feed gas composition, environment gaseous composition, and treatment distance, we find that short lived species, especially atomic O for Ar/1% O2 and 1% air plasma and OH for Ar/1% H2O plasma, play an essential role for polymer etching. For O2 containing plasma, we find that atomic O initiates polymer etching and the etching depth mirrors the measured decay of O atoms in the gas phase as the nozzle-surface distance increases. The etching reaction probability of an O atom ranging from 10-4 to 10-3 is consistent with low pressure plasma research. We also find that adding O2 and H2O simultaneously into Ar feed gas quenches polymer etching compared to adding them separately which suggests the reduction of O and OH density in Ar/O2/H2O plasma.

  8. Cleaning of niobium surface by plasma of diffuse discharge at atmospheric pressure

    Science.gov (United States)

    Tarasenko, V. F.; Erofeev, M. V.; Shulepov, M. A.; Ripenko, V. S.

    2017-07-01

    Elements composition of niobium surface before and after plasma treatment by runaway electron preionized diffuse discharge was investigated in atmospheric pressure nitrogen flow by means of an Auger electron spectroscopy. Surface characterizations obtained from Auger spectra show that plasma treatment by diffuse discharge after exposure of 120000 pulses provides ultrafine surface cleaning from carbon contamination. Moreover, the surface free energy of the treated specimens increased up to 3 times, that improve its adhesion property.

  9. About of the Electrostatic fields excitation theory by a RF wave in a plasma

    International Nuclear Information System (INIS)

    Gutierrez T, C.R.

    1991-01-01

    In an unidimensional model is shown in the cases of a semi limited plasma and a layer of plasma the excitement mechanism of electrostatic fields for a radiofrequency wave (RF) polarized lineally. This phenomenon depends strongly on the combined action of the Miller force and that of impulsion. It is shown that the action of these forces is carried out in different characteristic times when the front of wave crosses through the plasma. The cases of a semi limited plasma and of a layer of plasma without and with current are analyzed. It is shown that near the frontiers of the plasma where the field is sufficiently big arise oscillations of the width of the field that are slowly muffled in the space in an exponential way. In the cases of a plasma layer its are shown that the processes that arise near the frontier x = L are similar to the processes that arise near the frontier x = 0. The existence of current in the plasma layer leads to the blockade of the excited perturbations in the frontier x = L. (Author)

  10. Plasma chemistry in an atmospheric pressure Ar/NH3 dielectric barrier discharge

    DEFF Research Database (Denmark)

    Fateev, A.; Leipold, F.; Kusano, Y.

    2005-01-01

    An atmospheric pressure dielectric barrier discharge (DBD) in Ar/NH3 (0.1 - 10%) mixtures with a parallel plate electrode geometry was studied. The plasma was investigated by emission and absorption spectroscopy in the UV spectral range. Discharge current and voltage were measured as well. UV...... of an atmospheric pressure Ar/NH3 DBD are H-2, N-2 and N2H4. The hydrazine (N2H4) concentration in the plasma and in the exhaust gases at various ammonia concentrations and different discharge powers was measured. Thermal N2H4 decomposition into NH2 radicals may be used for NOx reduction processes....

  11. Fundamental investigations of capacitive radio frequency plasmas: simulations and experiments

    International Nuclear Information System (INIS)

    Donkó, Z; Derzsi, A; Hartmann, P; Korolov, I; Schulze, J; Czarnetzki, U; Schüngel, E

    2012-01-01

    Capacitive radio frequency (RF) discharge plasmas have been serving hi-tech industry (e.g. chip and solar cell manufacturing, realization of biocompatible surfaces) for several years. Nonetheless, their complex modes of operation are not fully understood and represent topics of high interest. The understanding of these phenomena is aided by modern diagnostic techniques and computer simulations. From the industrial point of view the control of ion properties is of particular interest; possibilities of independent control of the ion flux and the ion energy have been utilized via excitation of the discharges with multiple frequencies. ‘Classical’ dual-frequency (DF) discharges (where two significantly different driving frequencies are used), as well as discharges driven by a base frequency and its higher harmonic(s) have been analyzed thoroughly. It has been recognized that the second solution results in an electrically induced asymmetry (electrical asymmetry effect), which provides the basis for the control of the mean ion energy. This paper reviews recent advances on studies of the different electron heating mechanisms, on the possibilities of the separate control of ion energy and ion flux in DF discharges, on the effects of secondary electrons, as well as on the non-linear behavior (self-generated resonant current oscillations) of capacitive RF plasmas. The work is based on a synergistic approach of theoretical modeling, experiments and kinetic simulations based on the particle-in-cell approach. (paper)

  12. Diagnostics of the influence of levitating microparticles on the radiofrequency argon plasma

    International Nuclear Information System (INIS)

    Pustylnik, Mikhail Y.; Mitic, Slobodan; Klumov, Boris A.; Morfill, Gregor E.

    2010-01-01

    The effect of a levitating cloud of microparticles on the parameters of a radiofrequency (RF) plasma has been studied by means of two experimental techniques. Axial distributions of 1 s excited states of argon were measured by a self-absorption method. A correction of a standard self-absorption method for the extinction of the light by the levitating microparticles is proposed. In addition the electron temperature was estimated using the optical emission spectroscopy. Measurements at the same discharge conditions in a microparticle-free discharge and discharge, containing a cloud of levitating microparticles, revealed the non-local influence of the microparticle cloud on the discharge plasma. The most probable cause of this influence is the disturbance of the ionization balance by the levitating microparticles.

  13. Simulation of the formation of two-dimensional Coulomb liquids and solids in dusty plasmas

    International Nuclear Information System (INIS)

    Hwang, H.H.; Kushner, M.J.

    1997-01-01

    Dust particle transport in low-temperature plasmas has recently received considerable attention due to the desire to minimize contamination of wafers during plasma processing of microelectronics devices. Laser light scattering observations of dust particles near wafers in reactive-ion-etching (RIE) radio frequency (rf) discharges have revealed clouds which display collective behavior. These observations have motivated experimental studies of the Coulomb liquid and solid properties of these systems. In this paper, we present results from a two-dimensional model for dust particle transport in RIE rf discharges in which we include particle-particle Coulomb interactions. We predict the formation of Coulomb liquids and solids. These predictions are based both on values of Γ>2 (liquid) and Γ>170 (solid), where Γ is the ratio of electrostatic potential energy to thermal energy, and on crystal-like structure in the pair correlation function. We find that Coulomb liquids and solids composed of trapped dust particles in RIE discharges are preferentially formed with increasing gas pressure, decreasing particle size, and decreasing rf power. We also observe the ejection of particles from dust crystals which completely fill trapping sites, as well as lattice disordering followed by annealing and refreezing. copyright 1997 American Institute of Physics

  14. Dust acoustic waves in a dc glow-discharge plasma

    International Nuclear Information System (INIS)

    Molotkov, V.I.; Nefedov, A.P.; Torchinskii, V.M.; Fortov, V.E.; Khrapak, A.G.

    1999-01-01

    The spontaneous excitation of low-frequency oscillations of the macroparticle density in ordered dust structures levitating in standing striations of a dc glow discharge is discovered. It is concluded on the basis of a simplified linear model of an ideal collisionless plasma that the observed instability is caused by the drift motion of ions relative to the dust, which leads to the excitation of dust acoustic oscillations of the plasma

  15. Nanoparticle formation in a low pressure argon/aniline RF plasma

    Science.gov (United States)

    Pattyn, C.; Kovacevic, E.; Hussain, S.; Dias, A.; Lecas, T.; Berndt, J.

    2018-01-01

    The formation of nanoparticles in low temperature plasmas is of high importance for different fields: from astrophysics to microelectronics. The plasma based synthesis of nanoparticles is a complex multi-scale process that involves a great variety of different species and comprises timescales ranging from milliseconds to several minutes. This contribution focuses on the synthesis of nanoparticles in a low temperature, low pressure capacitively coupled plasma containing mixtures of argon and aniline. Aniline is commonly used for the production of polyaniline, a material that belongs to the family of conductive polymers, which has attracted increasing interest in the last few years due to the large number of potential applications. The nanoparticles which are formed in the plasma volume and levitate there due to the collection of negative charges are investigated in this contribution by means of in-situ FTIR spectroscopy. In addition, the plasma is analyzed by means of plasma (ion) mass spectroscopy. The experiments reveal the possibility to synthesize nanoparticles both in continuous wave and in pulsed discharges. The formation of particles in the plasma volume can be suppressed by pulsing the plasma in a specific frequency range. The in-situ FTIR analysis also reveals the influence of the argon plasma on the characteristics of the nanoparticles.

  16. Effect of Dielectric Barrier Discharge Plasma Actuators on Non-equilibrium Hypersonic Flows

    Science.gov (United States)

    2014-10-28

    results for MIG with the US3D code devel- oped at the University of Minnesota.61 US3D is an unstruc- tured CFD code for hypersonic flow solution used...Effect of dielectric barrier discharge plasma actuators on non-equilibrium hypersonic flows Ankush Bhatia,1 Subrata Roy,1 and Ryan Gosse2 1Applied...a cylindrical body in Mach 17 hypersonic flow is presented. This application focuses on using sinusoidal dielectric barrier discharge plasma actuators

  17. Dusty Plasmas in Laboratory and in Space

    International Nuclear Information System (INIS)

    Fortov, Vladimir E.

    2013-01-01

    Investigations were directed on the study of dusty plasma structures and dynamics. Dusty plasma is a unique laboratory tool for the investigation of the physics of systems with strong Coulomb interaction. This is due to the fact that the interaction of micron-sized dust particles (usually 0.1-10 µm in diameter) with charges up to 10 2 -10 5 elementary charges may form the ordered structures of liquid and crystal types accessible to observe them at kinetic level, i.e. at level of behavior of separate particles of medium. Dusty plasma is affected by gravity, depending on the size of the solid particles gravity can be the dominating force. Under microgravity conditions in space much weaker forces become important and other new phenomena not achievable on Earth can be observed. In this report results are presented from the experimental studies of dusty plasmas under ground bounded and microgravity conditions. Structural and transport characteristics of the system of macroparticles in dusty plasma were measured in a set of experiments in rf gas-discharge plasmas in microgravity conditions on the board of International Space Station. A number of different phenomena were studied including self-excitation of dusty waves, formation of plasma crystal and plasma liquid regions, different vortices of charged dust grains. The experimental studies of the viscosity of a dust-plasma liquid were carried out. The results of analysis of the obtained data made it possible to estimate the coefficient of dynamic viscosity of a dust-plasma liquid. Dusty plasmas were also studied in a combined dc/rf discharge under microgravity conditions in parabolic flights. The chamber provided a particular advantage for investigation of different dynamical phenomena in dusty plasmas such as sheared laminar flow of a strongly coupled dusty liquid, nozzle flow, boundary layers and instabilities, shock waves formation and propagation, dust particle lane formation and space dust grain separation by their

  18. Interaction of plasma with magnetic fields in coaxial discharge

    International Nuclear Information System (INIS)

    Soliman, H.M.; Masoud, M.M.

    1991-01-01

    Previous experiments have shown that, in normal mode of focus operation (67 KJ-20 KV) i.e. without external magnetic fields, the focus exhibits instability growths as revealed by the time integrated X-ray pinhole photographs. A magnetic field which is trapped ahead of the current sheath will reduce the high ejection rate of plasma which occurs during the (r,z) collapse stage. This reduction should lead to a more uniform plasma of larger dimension. If an externally excited axial magnetic field of (10 2 -10 3 G) is introduced at the end of the central electrode of coaxial discharge with 45 μf capacitor bank, U ch =13-17 KV, peak current ∼0.5 MA, the decay rate of the current sheath is slowed down and the minimum radius of the column remains large enough. Experiment investigation of the X-ray emission in axial direction from a (12 KJ/20 KV, 480 KA), Mather type focus, showed that the X-ray intensity changes drastically, by superimposing an axial magnetic field of 55 G on the focus. By introducing an external axial magnetic field of intensity 2.4 KG along the coaxial electrodes, this magnetic field has a radial component at distances approach to muzzle of coaxial discharge with charging voltage 10 KV and peak discharge current 100 KA. Presence of these magnetic fields, will cause an increase in intensity of soft X-ray emission. The main purpose of this work is to study the interactions of axial and transverse magnetic fields with plasma sheath during the axial interelectrode propagation, and its effects on the X-ray emission from plasma focus. (author) 4 refs., 7 figs

  19. Treatment of hazardous organic wastes using silent discharge plasmas

    International Nuclear Information System (INIS)

    Rosocha, L.A.; Anderson, G.K.; Bechtold, L.A.; Coogan, J.J.; Heck, H.G.; Kang, M.; McCulla, W.H.; Tennant, R.A.; Wantuck, P.J.

    1992-01-01

    During the past two decades, interest in applying non-equilibrium plasmas to the removal of hazardous chemicals from gaseous media has been growing, in particular from heightened concerns over the pollution of our environment and a growing body of environmental regulations. At the Los Alamos National Laboratory, we are currently engaged in a project to develop non-equilibrium plasma technology for hazardous waste treatment. Our present focus is on dielectric-barrier discharges, which are historically called silent electrical discharges. This type of plasma is also named a silent discharge plasma (SDP). We have chosen this method due to its potential for high energy efficiency, its scientific and technological maturity, and its scalability. The SDP process has been demonstrated to be reliable and economical for the industrial-scale synthesis of ozone, where municipal water treatment plants frequently require the on-site generation of thousands of kilograins per day (Eliasson ampersand Kogelschatz). The related methods of corona processing are presently the focus of work at other institutions, particularly for flue gas processing. Both SDP and corona processes are characterized by the production of large quantities of highly reactive free radicals, especially atomic oxygen O(3P) and the hydroxyl OH, in the gaseous medium and their subsequent reaction with contaminants. Our primary objective is to convert hazardous or toxic chemicals into non-hazardous compounds or into materials which are more amenable to treatment. In the ideal case, the hazardous wastes are destructively oxidized to simpler, non-hazardous compounds plus CO2 and H2O. Sometimes the reaction products are still potentially hazardous, but are easily treated by conventional methods to yield non-hazardous products

  20. DC Glow Discharge Plasma, Containing Dust Particles: Self Organization and Peculiarities of Behavior

    International Nuclear Information System (INIS)

    Molotkov, V.I.; Pustyl'nik, M.Y.; Torchinskij, V.M.; Fortov, V.E.

    2003-01-01

    Dust particles, immersed in a plasma, acquire charge due to which they may be electrostatically trapped in a plasma. The energy of the interaction of the dust particles may be enough to transfer the dust component to nonideal and even crystalline state. This phenomenon is observed in various plasmas. In the present work a review of the investigations of strongly nonideal dusty plasma of the dc glow discharge striations is given. The formation of plasma crystals, liquids and plasma liquid crystals is considered. Typical phenomenon a for the dc discharge dusty plasma, such as coexistence of different phases in a single structure, convective motions, dust acoustic instability, are underlined. Results of the experiments on different external influences on dusty plasma structures are stated. It is shown that external influences may be used for measuring of the particle charge and field of forces acting on a dust grain levitating in a plasma. (author)

  1. Spectroscopic Diagnostics of Barrier Discharge Plasmas in Mixtures of Zinc Diiodide with Inert Gases

    International Nuclear Information System (INIS)

    Guivan, N.N.; Malinin, A.N.

    2005-01-01

    The spectral characteristics of the emission of gas discharge atmospheric pressure plasmas in mixtures of zinc diiodide vapor with inert gases (He, Ne, Ar, Kr, and Xe) are investigated. The formation of a gas discharge plasma and the excitation of the components of a working mixture were performed in a high-frequency (with a repetition frequency of sinusoidal voltage pulses of 100 kHz) barrier discharge. The gas discharge emission was analyzed in the spectral range 200-900 nm with a resolution of 0.05 nm. Emission bands of ZnI(B-X) exciplex molecules and I* 2 excimer molecules, lines of inert gases, and emission bands of XeI* exciplex molecules (in Xe-containing mixtures) were revealed. It is ascertained that the strongest emission of ZnI* molecules is observed in ZnI 2 /He(Ne) mixtures. The regularities in the spectral characteristics of the gas discharge plasma emission are considered

  2. Three-fluid magnetohydrodynamical simulation of plasma focus discharges

    International Nuclear Information System (INIS)

    Behler, K.; Bruhns, H.

    1987-01-01

    A two-dimensional, three-fluid code based on the two-fluid Potter code [Methods in Computational Physics (Academic, New York, 1970), Vol. 9, p. 340] was developed for simulating the plasma focus discharge. With this code it is possible to treat the neutral gas in addition to the plasma components and to model the ionization and recombination phenomena. Thus the sheet dynamics in a plasma focus can be studied and effects investigated such as the occurrence of residual gas (or plasma) density behind the current sheet in the run-down phase. This is a prerequisite to the occurrence of leak currents, which are one of the causes limiting the performance of large plasma focus devices. It is shown that fast operating foci with small dimensions behave favorably compared with the ''classical'' Mather focus [Methods of Experimental Physics (Academic, New York, 1971), Vol. 9B, p. 187] with long coaxial electrodes

  3. RF-plasma vapor deposition of siloxane on paper. Part 1: Physical evolution of paper surface

    Science.gov (United States)

    Sahin, Halil Turgut

    2013-01-01

    An alternative, new approach to improve the hydrophobicity and barrier properties of paper was evaluated by radio-frequency (RF) plasma octamethylcyclotetrasiloxane (OMCTSO) vapor treatment. The interaction between OMCTSO and paper, causing the increased hydophobicity, is likely through covalent bonding. The deposited thin silicone-like polymeric layer from OMCTSO plasma treatment possessed desirable hydrophobic properties. The SEM micrographs showed uniformly distributed grainy particles with various shapes on the paper surface. Deposition of the silicone polymer-like layer with the plasma treatment affects the distribution of voids in the network structure and increases the barrier against water intake and air. The water absorptivity was reduced by 44% for the OMCTSO plasma treated sheet. The highest resistance to air flow was an approximately 41% lower air permeability than virgin paper.

  4. The electrical Discharge Characteristics of the 3.5 KJ Electrothermal Plasma Gun Experiment

    International Nuclear Information System (INIS)

    Diab, F.; El-Aragi, G.M.; El-Kashef, G.M.; Saudy, A.H.

    2013-01-01

    In order to better understand the operating characteristics of an electrothermal plasma gun and its design, a variety of operation characteristics including ( the length of the capillary, applied voltage, diameter of the capillary tube, circuit inductance) were investigated to determine performance effects and viability in a real system. An Electrothermal Plasma Gun (ETG) is composed of a capillary discharge tube made of Teflon operated with simple RLC circuit. The device called Electrothermal Gun (ETG) which is composed of 4 capacitors (70 μF, 10 kV, 1.3 μH) connected in parallel to a plasma source by means of one high power plane transmission line by mean of a switch triggered by negative pulse 360/385 V. For the present studies a simple RLC was chosen, which allowed the circuit parameters to be easily measure d. The electrothermal discharge characteristics of the plasma gun operated in open air, So that at atmospheric pressure the main parameters were measured. The gun voltage and discharge current are measured with voltage divider and Rogowiski coil respectively. From the results recorded we found that, the current lagged the voltage i-e the plasma source has an inductive reactivity. Moreover, the current value was changed by changing the circuit parameters, including the discharge voltage and circuit inductance, and the wire properties such as the length and diameter. The maximum gun current ranged between (5 - 50 KA) according to the charging voltage of capacitors between (1-7 KV), a typical discharge times are on the order r of 125 μS.

  5. Filtering peripheral high temperature electrons in a cylindrical rf-driven plasmas by an axisymmetric radial magnetic field

    Science.gov (United States)

    Akahoshi, Hikaru; Takahashi, Kazunori; Ando, Akira

    2018-03-01

    High temperature electrons generated near a radial wall of a cylindrical source tube in a radiofrequency (rf) inductively-coupled plasma is filtered by an axisymmetric radial magnetic field formed near the source exit by locating annular permanent magnets, where the axial magnetic field strength in the radially central region is fairly uniform inside the source tube and is close to zero near the source exit. The source is operated at 3 mTorr in argon and the rf antenna is powered by a 13.56 MHz and 400 W rf generator. Measurement of electron energy probability functions shows the presence of the peripheral high temperature electrons inside the source, while the temperature of the peripheral electrons downstream of the source is observed to be reduced.

  6. Characterization of diamond-like carbon thin film synthesized by RF atmospheric pressure plasma Ar/CH4 jet

    Science.gov (United States)

    Sohbatzadeh, Farshad; Safari, Reza; Etaati, G. Reza; Asadi, Eskandar; Mirzanejhad, Saeed; Hosseinnejad, Mohammad Taghi; Samadi, Omid; Bagheri, Hanieh

    2016-01-01

    The growth of diamond like carbon (DLC) on a Pyrex glass was investigated by a radio frequency (RF) atmospheric pressure plasma jet (APPJ). The plasma jet with capacitive configuration ran by a radio frequency power supply at 13.56 MHz. Alumina ceramic was used as dielectric barrier. Ar and CH4 were used in atmospheric pressure as carrier and precursor gases, respectively. Diamond like carbon thin films were deposited on Pyrex glass at substrate temperature and applied power of 130 °C and 250 Watts, respectively. Performing field emission scanning electron microscope (FE-SEM) and laser Raman spectroscopy analysis resulted in deposition rate and the ID/IG ratio of 21.31 nm/min and 0.47, respectively. The ID/IG ratio indicated that the coating possesses relative high sp3 content The optical emission spectroscopy (OES) diagnostic was applied to diagnose plasma jet species. Estimating electron temperature and density of the RF-APPJ resulted in 1.36 eV and 2.75 × 1014 cm-3 at the jet exit, respectively.

  7. Penetration of a dielectric barrier discharge plasma into textile structures at medium pressure

    International Nuclear Information System (INIS)

    Geyter, N De; Morent, R; Leys, C

    2006-01-01

    Plasma treatment of textiles is becoming more and more popular as a surface modification technique. Plasma treatment changes the outermost layer of a material without interfering with the bulk properties. However, textiles are several millimetres thick and need to be treated homogeneously throughout the entire thickness. To control the penetration depth of the plasma effect, it is necessary to study the influence of operating parameters. Three layers of a 100% polyester non-woven are treated in the medium pressure range (0.3-7 kPa) with a dielectric barrier discharge to study the influence of pressure and treatment time. Current and voltage waveforms and Lichtenberg figures are used to characterize the discharge. Process pressure proved to have an important effect on the penetration of the plasma through the textile layers. This is caused not only by the pressure dependence of diffusive transport of textile modifying particles but also by a different behaviour of the barrier discharge

  8. Electric field measurements in a hollow cathode discharge by two-photon polarization spectroscopy of atomic deuterium

    International Nuclear Information System (INIS)

    Rosa, M I de la; Perez, C; Gruetzmacher, K; Gonzalo, A B; Steiger, A

    2006-01-01

    The local electric field strength (E-field) is an important parameter to be known in low pressure plasmas such as glow discharges, RF and microwave discharges, plasma boundaries in tokamaks etc. In this paper, we demonstrate, for the first time, the potential of two-photon polarization spectroscopy measuring the E-field in the cathode fall region of a hollow cathode discharge, via Doppler-free spectra of the Stark splitting of the 2S level of atomic deuterium. Electric field strength is determined in the range from 2 to 5 kV cm -1 . Compared with LIF, this method has several advantages: it is not affected by background radiation, it can be applied without limitation at elevated pressure and it allows simultaneous measurement of absolute local atomic ground state densities of hydrogen isotopes

  9. Modification of the poly(ethylene) terephthalate track membrane structure and surface in the plasma of non-polymerized gases

    International Nuclear Information System (INIS)

    Kravets, L.I.; Dmitriev, S.N.; Apel, P.Y.

    1999-01-01

    An investigation of the properties of poly(ethylene) terephthalate track membranes (PETTMs) treated with a plasma RF-discharge in non-polymerized gases has been performed. The influence of the plasma treatment conditions on the basic properties of the membranes has been studied. It was arranged that the effect of non-polymerized gases plasma on the PETTMs results to etching a membrane's surface layer. The membranes' pore size and the form in this case change. It is shown that it is possible to change the structure of track membranes directly by gas discharge etching

  10. Profiles of plasma parameters and density of negative hydrogen ions by laser detachment measurements in RF-driven ion sources

    International Nuclear Information System (INIS)

    Christ-Koch, Sina

    2007-01-01

    This work shows the application of the Laserdetachment method for spatially resolved measurements of negative Hydrogen/Deuterium ion density. It was applied on a high power low pressure RF-driven ion source. The Laser detachment method is based on the measurement of electron currents on a positively biased Langmuir probe before and during/after a laser pulse. The density ratio of negative ions to electrons can be derived from the ratio of currents to the probe. The absolute density of negative ions can be obtained when the electron density is measured with the standard Langmuir probe setup. Measurements with the Langmuir probe additionally yield information about the floating and plasma potential, the electron temperature and the density of positive ions. The Laser detachment setup had to be adapted to the special conditions of the RF-driven source. In particular the existence of RF fields (1 MHz), high source potential (-20 kV), magnetic fields (∝ 7 mT) and caesium inside the source had to be considered. The density of negative ions could be identified in the range of n(H - )=1.10 17 1/m 3 , which is in the same order of magnitude as the electron density. Only the application of the Laser detachment method with the Langmuir probe measurements will yield spatially resolved plasma parameters and H- density profiles. The influence of diverse external parameters, such as pressure, RF-power, magnetic fields on the plasma parameters and their profiles were studied and explained. Hence, the measurements lead to a detailed understanding of the processes inside the source. (orig.)

  11. Laboratory Observation of a Plasma-Flow-State Transition from Diverging to Stretching a Magnetic Nozzle.

    Science.gov (United States)

    Takahashi, Kazunori; Ando, Akira

    2017-06-02

    An axial magnetic field induced by a plasma flow in a divergent magnetic nozzle is measured when injecting the plasma flow from a radio frequency (rf) plasma source located upstream of the nozzle. The source is operated with a pulsed rf power of 5 kW, and the high density plasma flow is sustained only for the initial ∼100  μsec of the discharge. The measurement shows a decrease in the axial magnetic field near the source exit, whereas an increase in the field is detected at the downstream side of the magnetic nozzle. These results demonstrate a spatial transition of the plasma-flow state from diverging to stretching the magnetic nozzle, where the importance of both the Alfvén and ion Mach numbers is shown.

  12. Diode with plasma cathode on the basis of a sliding discharge

    International Nuclear Information System (INIS)

    Korenev, S.A.

    1982-01-01

    The operative regime of a diode with plasma cathode on the basis of a discharge sliding over the surface of dielectric without an additional switching - on discharge generator at the glance of capacity couplings of anode and cathode assemblies is described. It is experimentally shown that at the voltage at the diode of about 150-300 kV electron beams with the 400-1000 A/cm current density can be formed. The velocity of cathode plasma motion in the direction of anode for different materials of dielctric insertion in a cathode assembly amounts to (1.5-10)x10 5 cm/s

  13. Plasma cleaning of beamline optical components: Contamination and gas composition effects

    International Nuclear Information System (INIS)

    Rosenberg, R.A.; Smith, J.A.; Wallace, D.J.

    1992-01-01

    We have initiated a program to study the impact of gas composition on the carbon removal rate during plasma cleaning of optical components, and of possible contamination due to the plasma processing. The measurements were performed in a test chamber designed to simulate the geometry of the grating/Codling mirror section of a Grasshopper monochromator. Removal rates were determined for a direct-current (dc) (Al electrode) discharge using a quartz crystal microbalance coated with polymethylmethacrylate, located at the position of the grating. Auger electron spectroscopy analysis of strateg- ically located, gold-coated stainless steel samples was employed to determine contamination. The relative removal rates of the gases studied were 3% C 2 F 6 /O 2 much-gt O 2 +H 2 O>O 2 ∼N 2 O>H 2 >N 2 . Although the C 2 F 6 /O 2 gas mixture showed a 20 times greater removal rate than its nearest competitor, it also caused significant contamination to occur. Contamination studies were performed for both dc and radio-frequency (rf) discharges. For the dc discharge we found that great care must be taken in order to avoid Al contamination; for the rf discharge, significant Fe contamination was observed

  14. The influence of exothermic reactions on the nonequilibrium level of discharge plasma

    International Nuclear Information System (INIS)

    Chernyak, V.Ya.; Iukhymenko, V.V.; Prysiazhnevych, I.V.; Martysh, Eu.V.

    2013-01-01

    The comparative analysis of plasma parameters of transverse arc and discharge in the gas channel with liquid wall was made for different working gas and liquids (for air, distilled water and for its mixtures with ethanol). Electronic excitation temperatures Te of atoms, vibrational Tv and rotational Tr temperatures of molecules in the generated plasma were determined by optical emission spectroscopy. It was shown that both discharges generate nonequilibrium plasma in the case of working gas air and working liquid-distilled water. Adding a fuel (ethanol) into the plasma system with O 2 leads to the increasing of rotational and vibrational temperatures of molecules, which became equal to each other within the errors. This may indicate that the exothermic reactions reduce the level of nonthermality of the generated plasma as a result of additional energy supply for heavy components in the process of complete combustion of hydrocarbons.

  15. How to increase the hydrophobicity of PTFE surfaces using an r.f. atmospheric-pressure plasma torch

    NARCIS (Netherlands)

    Carbone, E.A.D.; Boucher, N.; Sferrazza, M.; Reniers, F.

    2010-01-01

    An experimental investigation of the surface modification of polytetrafluoroethylene (PTFE) by an Ar and Ar/O2 plasma created with an atmospheric-pressure radio frequency (r.f.) torch is presented here. The surfaces were analyzed by atomic force microscopy (AFM), XPS and water contact angle (WCA) to

  16. Modeling of polarization phenomena due to RF sheaths and electron beams in magnetized plasma

    International Nuclear Information System (INIS)

    Faudot, E.

    2005-01-01

    This work investigates the problematic of hot spots induced by accelerated particle fluxes in tokamaks. It is shown that the polarization due to sheaths in the edge plasma in which an electron beam at a high level of energy is injected, can reach several hundreds volts and thus extend the deposition area. The notion of obstructed sheath is introduced and explains the acceleration of energy deposition by the decreasing of the sheath potential. Then, a 2-dimensional fluid modeling of flux tubes in front of ICRF antennae allows us to calculate the rectified potentials taking into account RF polarization currents transverse to magnetic field lines. The 2-dimensional fluid code designed validates the analytical results which show that the DC rectified potential is 50% greater with polarization currents than without. Finally, the simultaneous application of an electron beam and a RF potential reveals that the potentials due to each phenomenon are additives when RF potential is much greater than beam polarization. The density depletion of polarized flux tubes in 2-dimensional PIC (particles in cells) simulations is characterized but not yet explained. (author)

  17. The measurement of argon metastable atoms in the barrier discharge plasma

    Science.gov (United States)

    Ghildina, Anna R.; Mikheyev, Pavel Anatolyevich; Chernyshov, Aleksandr Konstantinovich; Lunev, Nikolai Nikolaevich; Azyazov, Valeriy Nikolaevich

    2018-04-01

    The mandatory condition for efficient operation of an optically-pumped all-rare-gas laser (OPRGL) is the presence of rare gas metastable atoms in the discharge plasma with number density of the order of 1012-1013 cm-3. This requirement mainly depends on the choice of a discharge system. In this study the number density values of argon metastable atoms were obtained in the condition of the dielectric-barrier discharge (DBD) at an atmospheric pressure.

  18. Comparison of dielectric barrier discharge, atmospheric pressure radiofrequency-driven glow discharge and direct analysis in real time sources for ambient mass spectrometry of acetaminophen

    Energy Technology Data Exchange (ETDEWEB)

    Kratzer, Jan [Institute for National Measurement Standards, National Research Council of Canada, 1200 Montreal Road, Ottawa, Ontario, K1A 0R6 (Canada); Institute of Analytical Chemistry of the ASCR, v.v.i., Veveri 97, CZ-602 00 Brno (Czech Republic); Mester, Zoltan [Institute for National Measurement Standards, National Research Council of Canada, 1200 Montreal Road, Ottawa, Ontario, K1A 0R6 (Canada); Sturgeon, Ralph E., E-mail: Ralph.Sturgeon@nrc-cnrc.gc.ca [Institute for National Measurement Standards, National Research Council of Canada, 1200 Montreal Road, Ottawa, Ontario, K1A 0R6 (Canada)

    2011-08-15

    Three plasma-based ambient pressure ion sources were investigated; laboratory constructed dielectric barrier and rf glow discharges, as well as a commercial corona discharge (DART source). All were used to desorb and ionize a model analyte, providing sampling techniques for ambient mass spectrometry (MS). Experimental parameters were optimized to achive highest signal for acetaminophen as the analyte. Insight into the mechanisms of analyte desorption and ionization was obtained by means of emission spectrometry and ion current measurements. Desorption and ionization mechanisms for this analyte appear to be identical for all three plasma sources. Emission spectra differ only in the intensities of various lines and bands. Desorption of solid analyte requires transfer of thermal energy from the plasma source to sample surface, in the absence of which complete loss of MS response occurs. For acetaminophen, helium was the best plasma gas, providing 100- to 1000-fold higher analyte response than with argon or nitrogen. The same trend was also evident with background ions (protonated water clusters). MS analyte signal intensity correlates with the ion density (expressed as ion current) in the plasma plume and with emission intensity from excited state species in the plasma. These observations support an ionization process which occurs via proton transfer from protonated water clusters to analyte molecules.

  19. Research on Permeability of Poly(ethylene) Terephthalate Track Membranes Modified in Plasma

    CERN Document Server

    Dmitriev, S N; Sleptsov, V V; Elinson, V M; Potrjasaj, V V

    2001-01-01

    The properties of poly(ethylene) terephthalate track membranes subjected to the plasma RF-discharge treatment in air have been investigated. The effect of the treatment conditions in plasma on the structure and the properties of the membranes formed in the gas-discharge etching has been studied. It has been figured out that the influence of the air plasma on the membranes under study leads to a formation of asymmetric membranes with a higher flow rate, the structure and chemical composition of their superficial layer are changed. It is shown that the presence of the modified layer on the surface of the membranes causes changing their hydrodynamic characteristics - water permeability of the membranes treated in plasma in a greater degree depends upon {pH} of the filtered solution.

  20. Rocket borne electron accelerator results pertaining to the beam plasma discharge

    International Nuclear Information System (INIS)

    Kellogg, P.J.; Monson, S.J.

    1981-01-01

    The beam plasma discharge (BPD) is a state in which plasma instabilities accelerate electrons sufficiently to ionize a neutral background. A description is given of a number of ionospheric experiments which fall into two classes based on gun perveance. In the first class, an electron gun of high perveance has been operated at comparatively low potentials in the range from 2 to 8 kV and beam currents up to approximately 100 mA. The second group, the Electron Echo experiments, have used beam voltages in the range from 10 to 40 kV, and perveance guns with beam currents on the order of 100 mA and 1 A. Evidence is presented that the beam plasma discharge is excited by gun pulses of the lower voltage and higher perveance type