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Sample records for psychol learn mem

  1. Aprendizado e memória Learning and memory

    Directory of Open Access Journals (Sweden)

    Paul Lombroso

    2004-09-01

    Full Text Available A memória é dividida de duas grandes formas: explícita e implícita. O hipocampo é necessário para a formação das memórias explícitas, ao passo que várias outras regiões do cérebro, incluindo o estriado, a amígdala e o nucleus accumbens, estão envolvidos na formação das memórias implícitas. A formação de todas as memórias requer alterações morfológicas nas sinapses: novas sinapses devem ser formadas ou antigas precisam ser fortalecidas. Considera-se que essas alterações reflitam a base celular subjacente das memórias persistentes. Consideráveis avanços têm ocorrido na última década em relação a nossa compreensão sobre as bases moleculares da formação dessas memórias. Um regulador-chave da plasticidade sináptica é uma via de sinalização que inclui a proteína-quinase ativada por mitógenos (MAP. Como essa via é necessária para a memória e o aprendizado normais, não é surpreendente que as mutações nos membros dessa via levem a prejuízos no aprendizado. A neurofibromatose, a síndrome de Coffin-Lowry e a de Rubinstein-Taybi são três exemplos de transtornos de desenvolvimento que apresentam mutações em componentes-chave na via de sinalização da proteína-quinase MAP.Memory is broadly divided into declarative and nondeclarative forms of memory. The hippocampus is required for the formation of declarative memories, while a number of other brain regions including the striatum, amygdala and nucleus accumbens are involved in the formation of nondeclarative memories. The formation of all memories require morphological changes of synapses: new ones must be formed or old ones strengthened. These changes are thought to reflect the underlying cellular basis for persistent memories. Considerable advances have occurred over the last decade in our understanding of the molecular bases of how these memories are formed. A key regulator of synaptic plasticity is a signaling pathway that includes the mitogen

  2. Minimal-Learning-Parameter Technique Based Adaptive Neural Sliding Mode Control of MEMS Gyroscope

    Directory of Open Access Journals (Sweden)

    Bin Xu

    2017-01-01

    Full Text Available This paper investigates an adaptive neural sliding mode controller for MEMS gyroscopes with minimal-learning-parameter technique. Considering the system uncertainty in dynamics, neural network is employed for approximation. Minimal-learning-parameter technique is constructed to decrease the number of update parameters, and in this way the computation burden is greatly reduced. Sliding mode control is designed to cancel the effect of time-varying disturbance. The closed-loop stability analysis is established via Lyapunov approach. Simulation results are presented to demonstrate the effectiveness of the method.

  3. EDITORIAL: International MEMS Conference 2006

    Science.gov (United States)

    Tay, Francis E. H.; Jianmin, Miao; Iliescu, Ciprian

    2006-04-01

    The International MEMS conference (iMEMS2006) organized by the Institute of Bioengineering and Nanotechnology and Nanyang Technological University aims to provide a platform for academicians, professionals and industrialists in various related fields from all over the world to share and learn from each other. Of great interest is the incorporation of the theme of life sciences application using MEMS. It is the desire of this conference to initiate collaboration and form network of cooperation. This has continued to be the objective of iMEMS since its inception in 1997. The technological advance of MEMS over the past few decades has been truly exciting in terms of development and applications. In order to participate in this rapid development, a conference involving delegates from within the MEMS community and outside the community is very meaningful and timely. With the receipt of over 200 articles, delegates related to MEMS field from all over the world will share their perspectives on topics such as MEMS/MST Design, MEMS Teaching and Education, MEMS/MST Packaging, MEMS/MST Fabrication, Microsystems Applications, System Integration, Wearable Devices, MEMSWear and BioMEMS. Invited speakers and delegates from outside the field have also been involved to provide challenges, especially in the life sciences field, for the MEMS community to potentially address. The proceedings of the conference will be published as an issue in the online Journal of Physics: Conference Series and this can reach a wider audience and will facilitate the reference and citation of the work presented in the conference. We wish to express our deep gratitude to the International Scientific Committee members and the organizing committee members for contributing to the success of this conference. We would like to thank all the delegates, speakers and sponsors from all over the world for presenting and sharing their perspectives on topics related to MEMS and the challenges that MEMS can

  4. MEMS reliability

    CERN Document Server

    Hartzell, Allyson L; Shea, Herbert R

    2010-01-01

    This book focuses on the reliability and manufacturability of MEMS at a fundamental level. It demonstrates how to design MEMs for reliability and provides detailed information on the different types of failure modes and how to avoid them.

  5. MEMS packaging

    CERN Document Server

    Hsu , Tai-Ran

    2004-01-01

    MEMS Packaging discusses the prevalent practices and enabling techniques in assembly, packaging and testing of microelectromechanical systems (MEMS). The entire spectrum of assembly, packaging and testing of MEMS and microsystems, from essential enabling technologies to applications in key industries of life sciences, telecommunications and aerospace engineering is covered. Other topics included are bonding and sealing of microcomponents, process flow of MEMS and microsystems packaging, automated microassembly, and testing and design for testing.The Institution of Engineering and Technology is

  6. Novel Symbol Learning-Induced Stroop Effect: Evidence for a Strategy-Based, Utility Learning Model.

    Science.gov (United States)

    Wang, Jin; Tang, Huijun; Deng, Yuan

    2016-10-01

    The automaticity level and attention priority/strategy are two major theories that have attempted to explain the mechanism underlying the Stroop effect. Training is an effective way to manipulate the experience with the two dimensions (ink color and color word) in the Stroop task. In order to distinguish the above two factors (the automaticity or attention/strategy), we revised the training paradigm of MacLeod's study (J Exp Psychol Learn Mem Cogn 14(1):126-135, 1988) by adding a control condition for the Stroop task on Chinese. We found that with training, the changing pattern for the Stroop effect was similar in Stroop tasks in novel symbols and in Chinese, showing markedly increasing interference and marginally decreasing facilitation. The current findings support the strategy-based learning account at early stages of novel learning of written symbols.

  7. MEMS Calculator

    Science.gov (United States)

    SRD 166 MEMS Calculator (Web, free access)   This MEMS Calculator determines the following thin film properties from data taken with an optical interferometer or comparable instrument: a) residual strain from fixed-fixed beams, b) strain gradient from cantilevers, c) step heights or thicknesses from step-height test structures, and d) in-plane lengths or deflections. Then, residual stress and stress gradient calculations can be made after an optical vibrometer or comparable instrument is used to obtain Young's modulus from resonating cantilevers or fixed-fixed beams. In addition, wafer bond strength is determined from micro-chevron test structures using a material test machine.

  8. An RCT to Treat Learning Impairment in Traumatic Brain Injury: The TBI-MEM Trial.

    Science.gov (United States)

    Chiaravalloti, Nancy D; Sandry, Joshua; Moore, Nancy B; DeLuca, John

    2016-07-01

    To examine the efficacy of the modified Story Memory Technique (mSMT) to improve learning (ie, acquisition) and memory in participants with TBI. The mSMT is a behavioral intervention that teaches context and imagery to facilitate learning within 10 sessions over 5 weeks. A total of 69 participants with moderate-severe Traumatic Brain Injury (TBI), 35 in the treatment group and 34 in the placebo control group, completed this double-blind, placebo-controlled randomized clinical trial. A baseline neuropsychological assessment was administered, including questionnaires assessing everyday memory. Repeat assessments were conducted immediately posttreatment and 6 months following treatment. Participants in the treatment group were randomly assigned to a booster session or a non-booster session group after completion of treatment with the mSMT to examine the efficacy of monthly booster sessions in facilitating the treatment effect over time. The treatment group demonstrated significant improvement on a prose memory task relative to the placebo group posttreatment (η(2) = 0.064 medium effect). Similar results were noted on objective measures of everyday memory, specifically prospective memory (Cohen's w = 0.43, medium effect), and family report of disinhibition in daily life (η(2) = 0.046, medium effect). The mSMT is effective for improving learning and memory in TBI. Based on widely accepted classification systems for treatment study design, this study provides class I evidence that the mSMT behavioral intervention improves both objective memory and everyday memory in persons with TBI over 5 weeks. Thus, this study extends the evidence for efficacy of the treatment protocol to a sample of persons with TBI. © The Author(s) 2015.

  9. Hollow MEMS

    DEFF Research Database (Denmark)

    Larsen, Peter Emil

    a hollow MEMS sensor has been designed, fabricated and tested. Combined density, viscosity, buoyant mass spectrometry and IR absorption spectroscopy are possible on liquid samples and micron sized suspended particles (e.g. single cells). Measurements are based on changes in the resonant behavior...... of these sensors. Optimization of the microfabrication process has led to a process yield of almost 100% .This is achieved despite the fact, that the process still offers a high degree of flexibility. By simple modifications the Sensor shape can be optimized for different size ranges and sensitivities...... technologies and pre-concentration approaches. A thorough theoretical analysis of the expected sensor responsivity and sensitivity is performed. Predictions made are confirmed by finite element simulations. Using these tools the sensor geometry is optimized for ideal performance in both mass density and IR...

  10. Microelectromechanical Systems (MEMS)

    Indian Academy of Sciences (India)

    Once the fabrication processes got established and commercial MEMS foundries came into existence, the focus shifted to MEMS design and system development. After the launch of a few commercially successful MEMS devices, the research focus has shifted to exploration of vast areas of applications. Application areas ...

  11. Biomaterials for MEMS

    CERN Document Server

    Chiao, Mu

    2011-01-01

    This book serves as a guide for practicing engineers, researchers, and students interested in MEMS devices that use biomaterials and biomedical applications. It is also suitable for engineers and researchers interested in MEMS and its applications but who do not have the necessary background in biomaterials.Biomaterials for MEMS highlights important features and issues of biomaterials that have been used in MEMS and biomedical areas. Hence this book is an essential guide for MEMS engineers or researchers who are trained in engineering institutes that do not provide the background or knowledge

  12. Advanced mechatronics and MEMS devices II

    CERN Document Server

    Wei, Bin

    2017-01-01

    This book introduces the state-of-the-art technologies in mechatronics, robotics, and MEMS devices in order to improve their methodologies. It provides a follow-up to "Advanced Mechatronics and MEMS Devices" (2013) with an exploration of the most up-to-date technologies and their applications, shown through examples that give readers insights and lessons learned from actual projects. Researchers on mechatronics, robotics, and MEMS as well as graduate students in mechanical engineering will find chapters on: Fundamental design and working principles on MEMS accelerometers Innovative mobile technologies Force/tactile sensors development Control schemes for reconfigurable robotic systems Inertial microfluidics Piezoelectric force sensors and dynamic calibration techniques ...And more. Authors explore applications in the areas of agriculture, biomedicine, advanced manufacturing, and space. Micro-assembly for current and future industries is also considered, as well as the design and development of micro and intel...

  13. Close Up - Mem Fox.

    Science.gov (United States)

    Moss, Barbara

    2003-01-01

    Presents an interview with Mem Fox, a teacher educator and children's book author well known throughout the world. Discusses writing books for children, and the mistakes she made early in her career as a writer. Notes that Mem is a tireless advocate for meaningful literacy instruction, and her "Radical Reflections: Passionate Opinions on Teaching,…

  14. Integrated design of MEMS

    DEFF Research Database (Denmark)

    De Grave, Arnaud; Brissaud, Daniel

    2007-01-01

    . Manufacturing is mainly coming from the silicon industry. Our interest is to highlight the differences between designing MEMS and designing classical ICs or mechanical devices, to propose new methods and aided-tools supporting the design process. Our methodology is based on an ethnographic approach through...... industrial immersion to propose a socio-technological description of the design process and MEMS design tools....

  15. MEMS in microfluidic channels.

    Energy Technology Data Exchange (ETDEWEB)

    Ashby, Carol Iris Hill; Okandan, Murat; Michalske, Terry A.; Sounart, Thomas L.; Matzke, Carolyn M.

    2004-03-01

    Microelectromechanical systems (MEMS) comprise a new class of devices that include various forms of sensors and actuators. Recent studies have shown that microscale cantilever structures are able to detect a wide range of chemicals, biomolecules or even single bacterial cells. In this approach, cantilever deflection replaces optical fluorescence detection thereby eliminating complex chemical tagging steps that are difficult to achieve with chip-based architectures. A key challenge to utilizing this new detection scheme is the incorporation of functionalized MEMS structures within complex microfluidic channel architectures. The ability to accomplish this integration is currently limited by the processing approaches used to seal lids on pre-etched microfluidic channels. This report describes Sandia's first construction of MEMS instrumented microfluidic chips, which were fabricated by combining our leading capabilities in MEMS processing with our low-temperature photolithographic method for fabricating microfluidic channels. We have explored in-situ cantilevers and other similar passive MEMS devices as a new approach to directly sense fluid transport, and have successfully monitored local flow rates and viscosities within microfluidic channels. Actuated MEMS structures have also been incorporated into microfluidic channels, and the electrical requirements for actuation in liquids have been quantified with an elegant theory. Electrostatic actuation in water has been accomplished, and a novel technique for monitoring local electrical conductivities has been invented.

  16. Advanced Mechatronics and MEMS Devices

    CERN Document Server

    2013-01-01

    Advanced Mechatronics and MEMS Devicesdescribes state-of-the-art MEMS devices and introduces the latest technology in electrical and mechanical microsystems. The evolution of design in microfabrication, as well as emerging issues in nanomaterials, micromachining, micromanufacturing and microassembly are all discussed at length in this volume. Advanced Mechatronics also provides a reader with knowledge of MEMS sensors array, MEMS multidimensional accelerometer, artificial skin with imbedded tactile components, as well as other topics in MEMS sensors and transducers. The book also presents a number of topics in advanced robotics and an abundance of applications of MEMS in robotics, like reconfigurable modular snake robots, magnetic MEMS robots for drug delivery and flying robots with adjustable wings, to name a few. This book also: Covers the fundamentals of advanced mechatronics and MEMS devices while also presenting new state-of-the-art methodology and technology used in the application of these devices Prese...

  17. Piezoelectric MEMS resonators

    CERN Document Server

    Piazza, Gianluca

    2017-01-01

    This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associate...

  18. Going Fabless with MEMS

    Directory of Open Access Journals (Sweden)

    Bhaskar CHOUBEY

    2011-04-01

    Full Text Available The Microelectromechanical sensors are finding increasing applications in everyday life. However, each MEMS sensor is generally fabricated on its own individual process. This leads to high cost per sensor. It has been suggested the MEMS should and would follow the path of integrated circuits industry, wherein fabless firms could concentrate on design leading pure-foundries to perfect the manufacturing process. With several designs being manufactured on the same process, the installation cost of fabrication would be evenly shared. Simultaneously, multiple project wafer runs are being offered for MEMS processes to encourage design activity in universities as well as startups. This paper reviews the present state of this transition through an experience of designing and manufacturing microelectromechanical resonators on different processes.

  19. Electromagnetic actuation in MEMS switches

    DEFF Research Database (Denmark)

    Oliveira Hansen, Roana Melina de; Mátéfi-Tempfli, Mária; Chemnitz, Steffen

    . Electromagnetic actuation is a very promising approach to operate such MEMS and Power MEMS devices, due to the long range, reproducible and strong forces generated by this method, among other advantages. However, the use of electromagnetic actuation in such devices requires the use of thick magnetic films, which...

  20. Review of polymer MEMS micromachining

    Science.gov (United States)

    Kim, Brian J.; Meng, Ellis

    2016-01-01

    The development of polymer micromachining technologies that complement traditional silicon approaches has enabled the broadening of microelectromechanical systems (MEMS) applications. Polymeric materials feature a diverse set of properties not present in traditional microfabrication materials. The investigation and development of these materials have opened the door to alternative and potentially more cost effective manufacturing options to produce highly flexible structures and substrates with tailorable bulk and surface properties. As a broad review of the progress of polymers within MEMS, major and recent developments in polymer micromachining are presented here, including deposition, removal, and release techniques for three widely used MEMS polymer materials, namely SU-8, polyimide, and Parylene C. The application of these techniques to create devices having flexible substrates and novel polymer structural elements for biomedical MEMS (bioMEMS) is also reviewed.

  1. MEMS-gyromatriser

    OpenAIRE

    Sandmo, Tomas

    2011-01-01

    Denne masteroppgaven tar for seg bruk av gyromatriser for å forbedre nøyaktigheten til MEMS-gyroer. Det er utviklet en matematisk modell av vinkelhastighetsmålinger fra et enkelt gyroskop, og det er gjort forsøk på å få en høyere nøyaktighet ved å kombinere målinger fra flere gyroer. I gyromatrisene er støybidragene fra gyroene samlet og kombinert, og det er benyttet Kalmanfilter som filtrerer bort store deler av støyen. Flere scenarioer er simulert, blant annet med forskjellige antall gyroer...

  2. Memòria d'activitat 2011

    OpenAIRE

    eLearn Center

    2012-01-01

    Memòria d'activitat de l'eLearn Center, el centre de recerca, innovació i formació en e-learning de la UOC, corresponent a l'any 2011. Memoria de actividad del eLearn Center, el centro de investigación, innovación y formación en e-learning de la UOC, correspondiente al año 2011. 2011 Report on activities of the eLearn Center, the e-learning research, innovation and training center of the UOC.

  3. Memòria d'activitat 2009

    OpenAIRE

    eLearn Center

    2010-01-01

    Memòria d'activitat de l'eLearn Center, el centre de recerca, innovació i formació en e-learning de la UOC, corresponent a l'any 2009. Memoria de actividad del eLearn Center, el centro de investigación, innovación y formación en e-learning de la UOC, correspondiente al año 2009. 2009 Report on activities of the eLearn Center, the e-learning research, innovation and training center of the UOC.

  4. Critical dimension: MEMS road map

    Science.gov (United States)

    Poulingue, Marc; Knutrud, Paul

    2007-03-01

    The use of Micro-Electro-Mechanical Systems (MEMS) technology in mechanical, biotechnology, optical, communications, and ink jet is growing. Critical dimensions in MEMS devices are getting smaller and processes are constantly facing new metrology challenges. This paper will examine some critical dimension metrology needs and challenges for MEMS using resist-on-silicon structures. It is shown that the use of automated optical CD metrology can meet emerging measurement requirements while bringing the advantages of a non-destructive, high throughput and precise methodology.

  5. Topology optimized RF MEMS switches

    DEFF Research Database (Denmark)

    Philippine, M. A.; Zareie, H.; Sigmund, Ole

    2013-01-01

    optimization for an RF MEM capacitive switch. Extensive experimental data confirms that the switches perform as designed by the optimizations, and that our simulation models are accurate. A subset of measurements are presented here. Broader results have been submitted in full journal format.......Topology optimization is a rigorous and powerful method that should become a standard MEMS design tool - it can produce unique and non-intuitive designs that meet complex objectives and can dramatically improve the performance and reliability of MEMS devices. We present successful uses of topology...

  6. Parylene for MEMS applications

    Science.gov (United States)

    Yao, Tze-Jung

    The goal of this thesis is to utilize Parylene, a room-temperature chemical-vapor-deposited (CVD) polymer, for MicroElectroMechanical Systems (MEMS) applications. The identified unique properties of Parylene are used to fabricate various micromachining devices such as thermopneumatic microvalve, in-channel microflow restrictor, and electret microphones. First, the properties of Parylene as a MEMS material are reviewed. The electrical, thermal, surface, and mechanical properties are first compared with that of other materials and further studied specifically for MEMS applications. The high dielectric strength (determined as 250V/mum) of Parylene makes it suitable for use as an electrical insulation material. However, its high resistivity causes un-desired charging effects first described in polymer-based electrostatic devices. The undesired high pull-in voltage, "bounce-back," and "snap-down" effects caused by dielectric charging are studied. Second, to make Parylene as a surface-micromachined material, a process that overcomes the stiction problem has to be developed. Thus, a new technique that combines wet-acetone dissolution and dry BrF3 dry etching has developed to overcome the stiction problem, which prevents Parylene microstructures from freestanding. The devices of mm*mm size with high yield are demonstrated using this technology. A thermopneumatic microvalve with a corrugated silicone/Parylene composite membrane is designed, fabricated, and tested for gas flows of several slpm and inlet pressures of tens of psi. The lowest power consumption to turn off the gas flow is determined to be 73mW. A silicone-based microfluidic coupler, initially designed for microvalve packaging, is also demonstrated for its ability to connect the external macrofluidic world to microfluidic devices. The demonstrated "quick-connect" microfluidic coupler has low leakage, is reusable, and can maintain good seal up to 60 psi. An in-channel microflow restrictor is also demonstrated with

  7. Cryogenic MEMS Pressure Sensor Project

    Data.gov (United States)

    National Aeronautics and Space Administration — A directly immersible cryogenic MEMS pressure sensor will be developed. Each silicon die will contain a vacuum-reference and a tent-like membrane. Offsetting thermal...

  8. Ovenized microelectromechanical system (MEMS) resonator

    Energy Technology Data Exchange (ETDEWEB)

    Olsson, Roy H; Wojciechowski, Kenneth; Kim, Bongsang

    2014-03-11

    An ovenized micro-electro-mechanical system (MEMS) resonator including: a substantially thermally isolated mechanical resonator cavity; a mechanical oscillator coupled to the mechanical resonator cavity; and a heating element formed on the mechanical resonator cavity.

  9. Long Life MEM Switch Technology

    National Research Council Canada - National Science Library

    Rebeiz, Gabriel M

    2006-01-01

    Report developed under contract FA8718-04-C-0029. Microelectromechanical (MEM) switches have already been developed that demonstrate exceptional RF performance but have been plagued by poor reliability...

  10. Optically transduced MEMS magnetometer

    Science.gov (United States)

    Nielson, Gregory N; Langlois, Eric

    2014-03-18

    MEMS magnetometers with optically transduced resonator displacement are described herein. Improved sensitivity, crosstalk reduction, and extended dynamic range may be achieved with devices including a deflectable resonator suspended from the support, a first grating extending from the support and disposed over the resonator, a pair of drive electrodes to drive an alternating current through the resonator, and a second grating in the resonator overlapping the first grating to form a multi-layer grating having apertures that vary dimensionally in response to deflection occurring as the resonator mechanically resonates in a plane parallel to the first grating in the presence of a magnetic field as a function of the Lorentz force resulting from the alternating current. A plurality of such multi-layer gratings may be disposed across a length of the resonator to provide greater dynamic range and/or accommodate fabrication tolerances.

  11. MEMS glaucoma monitoring device

    Science.gov (United States)

    Shankar, Smitha; Austin, Michael

    2007-04-01

    Glaucoma is a serious disease, affecting millions of people worldwide requiring continuous monitoring of Intra Ocular Pressure (IOP) to avoid the risk of blindness. Current laboratory measurements are infrequent, intrusive and do not indicate the progression of the disease. The paper reports on the development of an implantable Glaucoma monitoring system that can monitor IOP in the eye to indicate any elevation in risk to the patient. A mathematical model of the anterior chamber of the eye was used to analyze the complex fluid flow and pressure balance in the eye. This was done in order to determine the performance requirements of the actuator, sensor and transmission electronics that could be integrated on a single microchip using microelectromechanical systems (MEMS) technology, to carry out the testing internally. The accuracy of the system was theoretically tested against results from external medical tests. The results were found to be comparable.

  12. MEMS digital parametric loudspeaker

    KAUST Repository

    Carreno, Armando Arpys Arevalo

    2016-03-23

    This paper reports on the design and fabrication of MEMS actuator arrays suitable for Digital Sound reconstruction and Parametric Directional Loudspeakers. Two distinct versions of the device were fabricated: one using the electrostatic principle actuation and the other one, the piezoelectric principle. Both versions used similar membrane dimensions, with a diameter of 500 μm. These devices are the smallest Micro-Machined Ultrasound Transducer (MUT) arrays that can be operated for both modes: Digital Sound Reconstruction and Parametric Loudspeaker. The chips consist of an array with 256 transducers, in a footprint of 12 mm by 12 mm. The total single chip size is: 2.3 cm by 2.3 cm, including the contact pads. © 2016 IEEE.

  13. Effects of Radiation on MEMS

    OpenAIRE

    Shea, Herbert

    2011-01-01

    The sensitivity of MEMS devices to radiation is reviewed, with an emphasis on radiation levels representative of space missions. While silicon and metals generally do not show mechanical degradation at the radiation levels encountered in most missions, MEMS devices have been reported to fail at doses of as few krad, corresponding to less than one year in most orbits. Radiation sensitivity is linked primarily to the impact on device operation of radiation-induced trapped charge in dielectrics...

  14. MEMS for automotive and aerospace applications

    CERN Document Server

    Kraft, Michael

    2013-01-01

    MEMS for automotive and aerospace applications reviews the use of Micro-Electro-Mechanical-Systems (MEMS) in developing solutions to the unique challenges presented by the automotive and aerospace industries.Part one explores MEMS for a variety of automotive applications. The role of MEMS in passenger safety and comfort, sensors for automotive vehicle stability control applications and automotive tire pressure monitoring systems are considered, along with pressure and flow sensors for engine management, and RF MEMS for automotive radar sensors. Part two then goes on to explore MEMS for

  15. CMOS MEMS Fabrication Technologies and Devices

    Directory of Open Access Journals (Sweden)

    Hongwei Qu

    2016-01-01

    Full Text Available This paper reviews CMOS (complementary metal-oxide-semiconductor MEMS (micro-electro-mechanical systems fabrication technologies and enabled micro devices of various sensors and actuators. The technologies are classified based on the sequence of the fabrication of CMOS circuitry and MEMS elements, while SOI (silicon-on-insulator CMOS MEMS are introduced separately. Introduction of associated devices follows the description of the respective CMOS MEMS technologies. Due to the vast array of CMOS MEMS devices, this review focuses only on the most typical MEMS sensors and actuators including pressure sensors, inertial sensors, frequency reference devices and actuators utilizing different physics effects and the fabrication processes introduced. Moreover, the incorporation of MEMS and CMOS is limited to monolithic integration, meaning wafer-bonding-based stacking and other integration approaches, despite their advantages, are excluded from the discussion. Both competitive industrial products and state-of-the-art research results on CMOS MEMS are covered.

  16. Microelectromechanical (MEM) thermal actuator

    Science.gov (United States)

    Garcia, Ernest J [Albuquerque, NM; Fulcher, Clay W. G. [Sandia Park, NM

    2012-07-31

    Microelectromechanical (MEM) buckling beam thermal actuators are disclosed wherein the buckling direction of a beam is constrained to a desired direction of actuation, which can be in-plane or out-of-plane with respect to a support substrate. The actuators comprise as-fabricated, linear beams of uniform cross section supported above the substrate by supports which rigidly attach a beam to the substrate. The beams can be heated by methods including the passage of an electrical current through them. The buckling direction of an initially straight beam upon heating and expansion is controlled by incorporating one or more directional constraints attached to the substrate and proximal to the mid-point of the beam. In the event that the beam initially buckles in an undesired direction, deformation of the beam induced by contact with a directional constraint generates an opposing force to re-direct the buckling beam into the desired direction. The displacement and force generated by the movement of the buckling beam can be harnessed to perform useful work, such as closing contacts in an electrical switch.

  17. Modeling nonlinearities in MEMS oscillators.

    Science.gov (United States)

    Agrawal, Deepak K; Woodhouse, Jim; Seshia, Ashwin A

    2013-08-01

    We present a mathematical model of a microelectromechanical system (MEMS) oscillator that integrates the nonlinearities of the MEMS resonator and the oscillator circuitry in a single numerical modeling environment. This is achieved by transforming the conventional nonlinear mechanical model into the electrical domain while simultaneously considering the prominent nonlinearities of the resonator. The proposed nonlinear electrical model is validated by comparing the simulated amplitude-frequency response with measurements on an open-loop electrically addressed flexural silicon MEMS resonator driven to large motional amplitudes. Next, the essential nonlinearities in the oscillator circuit are investigated and a mathematical model of a MEMS oscillator is proposed that integrates the nonlinearities of the resonator. The concept is illustrated for MEMS transimpedance-amplifier- based square-wave and sine-wave oscillators. Closed-form expressions of steady-state output power and output frequency are derived for both oscillator models and compared with experimental and simulation results, with a good match in the predicted trends in all three cases.

  18. Electrostatic MEMS devices with high reliability

    Science.gov (United States)

    Goldsmith, Charles L; Auciello, Orlando H; Sumant, Anirudha V; Mancini, Derrick C; Gudeman, Chris; Sampath, Suresh; Carlilse, John A; Carpick, Robert W; Hwang, James

    2015-02-24

    The present invention provides for an electrostatic microelectromechanical (MEMS) device comprising a dielectric layer separating a first conductor and a second conductor. The first conductor is moveable towards the second conductor, when a voltage is applied to the MEMS device. The dielectric layer recovers from dielectric charging failure almost immediately upon removal of the voltage from the MEMS device.

  19. Structured synthesis of MEMS using evolutionary approaches

    DEFF Research Database (Denmark)

    Fan, Zhun; Wang, Jiachuan; Achiche, Sofiane

    2008-01-01

    In this paper, we discuss the hierarchy that is involved in a typical MEMS design and how evolutionary approaches can be used to automate the hierarchical synthesis process for MEMS. The paper first introduces the flow of a structured MEMS design process and emphasizes that system-level lumped-pa...

  20. Learning Behaviour and Learning Outcomes: The Roles for Social Influence and Field of Study

    Science.gov (United States)

    Smyth, Lillian; Mavor, Kenneth I.; Platow, Michael J.

    2017-01-01

    Research has demonstrated a significant role of discipline social identification in predicting learning approaches, even controlling for individual differences. Smyth et al. ("Educ Psychol" 35(1):53-72, 2015. doi:10.1080/01443410.2013.822962) suggest that learners share discipline-based social identifications, and that this…

  1. Surface engineering for MEMS reliability

    Science.gov (United States)

    Ashurst, William Robert

    The integration of miniaturized mechanical components with microelectronic components has spawned a new technology known as microelectromechanical systems (MEMS). This technology extends the benefits of microelectronic fabrication to sensing and actuating functions. Examples of MEMS devices that have been commercially produced include relatively simple mechanisms such as accelerometers, pressure sensors and digital mirror projectors. Despite recent progress in micromachining capability, the realization of more complex commercial and specialized use of MEMS is challenged due to plaguing reliability issues. Barriers to the widespread commercialization and development of MEMS technologies are steep and require engineering at the molecular level. Reliability issues which commonly limit MEMS to the research level include (but are not limited to) adhesion (also referred to as "stiction") and wear. The goal of this work is to improve MEMS reliability by developing new processes and techniques that allow the study of adhesion and wear, that are industrially favorable and that are process compatible with MEMS fabrication schemes. A "tribology chip" has been developed which employs a variety of standard micromechanical test instruments as well as new devices. Also, a liquid based anti-adhesion coating process for MEMS which utilizes non-chlorosilane chemistry is developed. This octadecene based coating process is simpler than the standard chlorosilane processes, and circumvents a number of limitations imposed by chlorosilane chemistry. In order to provide a manufacturable anti-adhesion process, a new vapor phase coating method has been developed. This method is based on chlorosilane chemistry, specifically dichlorodimethylsilane, and has been shown to be effective at reducing adhesion in fully packaged devices at the wafer scale. To address the issue of wear, novel methods of producing films of silicon carbide as coatings for existing polysilicon micromachines have been

  2. MemBrain: improving the accuracy of predicting transmembrane helices.

    Directory of Open Access Journals (Sweden)

    Hongbin Shen

    Full Text Available Prediction of transmembrane helices (TMH in alpha helical membrane proteins provides valuable information about the protein topology when the high resolution structures are not available. Many predictors have been developed based on either amino acid hydrophobicity scale or pure statistical approaches. While these predictors perform reasonably well in identifying the number of TMHs in a protein, they are generally inaccurate in predicting the ends of TMHs, or TMHs of unusual length. To improve the accuracy of TMH detection, we developed a machine-learning based predictor, MemBrain, which integrates a number of modern bioinformatics approaches including sequence representation by multiple sequence alignment matrix, the optimized evidence-theoretic K-nearest neighbor prediction algorithm, fusion of multiple prediction window sizes, and classification by dynamic threshold. MemBrain demonstrates an overall improvement of about 20% in prediction accuracy, particularly, in predicting the ends of TMHs and TMHs that are shorter than 15 residues. It also has the capability to detect N-terminal signal peptides. The MemBrain predictor is a useful sequence-based analysis tool for functional and structural characterization of helical membrane proteins; it is freely available at http://chou.med.harvard.edu/bioinf/MemBrain/.

  3. MEMS linear and nonlinear statics and dynamics

    CERN Document Server

    Younis, Mohammad I

    2011-01-01

    MEMS Linear and Nonlinear Statics and Dynamics presents the necessary analytical and computational tools for MEMS designers to model and simulate most known MEMS devices, structures, and phenomena. This book also provides an in-depth analysis and treatment of the most common static and dynamic phenomena in MEMS that are encountered by engineers. Coverage also includes nonlinear modeling approaches to modeling various MEMS phenomena of a nonlinear nature, such as those due to electrostatic forces, squeeze-film damping, and large deflection of structures. The book also: Includes examples of nume

  4. Of light, of MEMS: Optical MEMS in telecommunications and beyond

    Indian Academy of Sciences (India)

    The burst of the Internet bubble in 2000 has severely quenched the pace of development in the optical MEMS field. However, it is now clear that this field is again set to move forward as not only telecommunication but many other industries are benefiting from its application. We describe in this paper some of our latest ...

  5. "Mem's the Word": Examining the Writing of Mem Fox.

    Science.gov (United States)

    Gilles, Carol

    2000-01-01

    Focuses on the work of Mem Fox. Explores Fox's life in order to better understand her work; examines books she has written for teachers and for parents; and reviews her children's books, emphasizing children's and teachers comments. Looks at best-loved books, bedtime books, predictable books for early readers, books that play with language, and…

  6. Of light, of MEMS: Optical MEMS in telecommunications and beyond

    Indian Academy of Sciences (India)

    The burst of the Internet bubble in 2000 has severely quenched the pace of development in the optical MEMS ... products and services resulted in the burst of what was called the Internet bubble. Many com- ... The use of external cavity laser for precise displacement measurement has a long history. (Mileset al1983; Lang ...

  7. MEMS AO for Planet Finding

    Science.gov (United States)

    Rao, Shanti; Wallace, J. Kent; Shao, Mike; Schmidtlin, Edouard; Levine, B. Martin; Samuele, Rocco; Lane, Benjamin; Chakrabarti, Supriya; Cook, Timothy; Hicks, Brian; hide

    2008-01-01

    This slide presentation reviews a method for planet finding using microelectromechanical systems (MEMS) Adaptive Optics (AO). The use of a deformable mirror (DM) is described as a part of the instrument that was designed with a nulling interferometer. The strategy that is used is described in detail.

  8. Questionnaire of Memory (Q-MEM): A new measure of everyday memory functioning in school-age children.

    Science.gov (United States)

    Geurten, Marie; Majerus, Steve; Lejeune, Caroline; Catale, Corinne

    2018-01-01

    We present a new measure of everyday memory, the Questionnaire of Memory (Q-MEM), which is specifically adapted for the ecological assessment of memory disorders in school-age children and constructed with four sections tapping effortful/intentional learning, automatic/procedural learning, prospective memory/organization, and working memory. Confirmatory Factor Analyses supported the Q-MEM's four-factor structure in 700 five-to twelve-year-old children. The analyses also revealed a good internal reliability and a good test-retest fidelity. Finally, comparisons between Q-MEM profiles of children with learning disabilities and typically developing children revealed significant differences. Therefore, the Q-MEM is a promising measure for identifying memory problems in children.

  9. Enhancing socially shared regulation in collaborative learning groups: Designing for CSCL regulation tools

    NARCIS (Netherlands)

    Järvelä, Sanna; Kirschner, Paul|info:eu-repo/dai/nl/079457037; Panadero, Ernesto; Malmberg, Jonna; Phielix, Chris|info:eu-repo/dai/nl/304833738; Jaspers, Jos|info:eu-repo/dai/nl/304825220; Koivuniemi, Marika; Järvenoja, Hanna

    2014-01-01

    For effective computer supported collaborative learning (CSCL), socially shared regulation of learning (SSRL) is necessary. To this end, this article extends the idea first posited by Järvelä and Hadwin (Educ Psychol 48(1):25–39, 2013) that successful collaboration in CSCL contexts requires targeted

  10. Enhancing socially shared regulation in collaborative learning groups: designing for CSCL regulation tools

    NARCIS (Netherlands)

    Järvelä, Sanna; Kirschner, Paul A.; Panadero, Ernesto; Malmberg, Jonna; Phielix, Chris; Jaspers, Jos; Koivuniemi, Marieke; Järvenoja, Hanna

    2016-01-01

    For effective computer supported collaborative learning (CSCL), socially shared regulation of learning (SSRL) is necessary. To this end, this article extends the idea first posited by Ja¨rvela¨ and Hadwin (Educ Psychol 48(1):25–39, 2013) that successful collaboration in CSCL contexts requires

  11. An Exploration of Community Learning Disability Nurses' Therapeutic Role

    Science.gov (United States)

    Marsham, Marian

    2012-01-01

    This literature review and primary qualitative research explores therapeutic role from the perspective of Community Learning Disability Nurses. Semi-structured interviews, based on Critical Incident Technique ("Psychol Bull", 51, 1954, 327), and descriptive phenomenological methodology were adopted to elicit data amenable to systematic…

  12. Phases and Patterns of Group Development in Virtual Learning Teams

    Science.gov (United States)

    Yoon, Seung Won; Johnson, Scott D.

    2008-01-01

    With the advancement of Internet communication technologies, distributed work groups have great potential for remote collaboration and use of collective knowledge. Adopting the Complex Adaptive System (CAS) perspective (McGrath, Arrow, & Berdhal, "Personal Soc Psychol Rev" 4 (2000) 95), which views virtual learning teams as an adaptive and…

  13. Integration of a MEMS Inertial Measuring Unit with a MEMS Magnetometer for 3D Orientation Estimation

    DEFF Research Database (Denmark)

    Cai, Junping; Malureanu, Christian; Andersen, Niels Lervad

    2011-01-01

    This paper presents an algorithm for combining the measurements of a MEMS Inertial Measurement Unit (IMU) and a MEMS magnetometer. The measurements are done using a special designed and customized miniature detecting system for 3D orientation estimation, and position tracking......This paper presents an algorithm for combining the measurements of a MEMS Inertial Measurement Unit (IMU) and a MEMS magnetometer. The measurements are done using a special designed and customized miniature detecting system for 3D orientation estimation, and position tracking...

  14. Miniaturized GPS/MEMS IMU integrated board

    Science.gov (United States)

    Lin, Ching-Fang (Inventor)

    2012-01-01

    This invention documents the efforts on the research and development of a miniaturized GPS/MEMS IMU integrated navigation system. A miniaturized GPS/MEMS IMU integrated navigation system is presented; Laser Dynamic Range Imager (LDRI) based alignment algorithm for space applications is discussed. Two navigation cameras are also included to measure the range and range rate which can be integrated into the GPS/MEMS IMU system to enhance the navigation solution.

  15. Mem-PHybrid: hybrid features-based prediction system for classifying membrane protein types.

    Science.gov (United States)

    Hayat, Maqsood; Khan, Asifullah

    2012-05-01

    Membrane proteins are a major class of proteins and encoded by approximately 20% to 30% of genes in most organisms. In this work, a two-layer novel membrane protein prediction system, called Mem-PHybrid, is proposed. It is able to first identify the protein query as a membrane or nonmembrane protein. In the second level, it further identifies the type of membrane protein. The proposed Mem-PHybrid prediction system is based on hybrid features, whereby a fusion of both the physicochemical and split amino acid composition-based features is performed. This enables the proposed Mem-PHybrid to exploit the discrimination capabilities of both types of feature extraction strategy. In addition, minimum redundancy and maximum relevance has also been applied to reduce the dimensionality of a feature vector. We employ random forest, evidence-theoretic K-nearest neighbor, and support vector machine (SVM) as classifiers and analyze their performance on two datasets. SVM using hybrid features yields the highest accuracy of 89.6% and 97.3% on dataset1 and 91.5% and 95.5% on dataset2 for jackknife and independent dataset tests, respectively. The enhanced prediction performance of Mem-PHybrid is largely attributed to the exploitation of the discrimination power of the hybrid features and of the learning capability of SVM. Mem-PHybrid is accessible at http://www.111.68.99.218/Mem-PHybrid. Copyright © 2012 Elsevier Inc. All rights reserved.

  16. Cryogenic MEMS Technology for Sensing Applications Project

    Data.gov (United States)

    National Aeronautics and Space Administration — The development of cryogenic microwave components, such as focal plane polarization modulators, first requires an RF MEMS switching technology that operates...

  17. Surface chemistry and tribology of MEMS.

    Science.gov (United States)

    Maboudian, Roya; Carraro, Carlo

    2004-01-01

    The microscopic length scale and high surface-to-volume ratio, characteristic of microelectro-mechanical systems (MEMS), dictate that surface properties are of paramount importance. This review deals with the effects of surface chemical treatments on tribological properties (adhesion, friction, and wear) of MEMS devices. After a brief review of materials and processes that are utilized in MEMS technology, the relevant tribological and chemical issues are discussed. Various MEMS microinstruments are discussed, which are commonly employed to perform adhesion, friction, and wear measurements. The effects of different surface treatments on the reported tribological properties are discussed.

  18. MEMS Bragg grating force sensor

    DEFF Research Database (Denmark)

    Reck, Kasper; Thomsen, Erik Vilain; Hansen, Ole

    2011-01-01

    We present modeling, design, fabrication and characterization of a new type of all-optical frequency modulated MEMS force sensor based on a mechanically amplified double clamped waveguide beam structure with integrated Bragg grating. The sensor is ideally suited for force measurements in harsh...... environments and for remote and distributed sensing and has a measured sensitivity of -14 nm/N, which is several times higher than what is obtained in conventional fiber Bragg grating force sensors. © 2011 Optical Society of America....

  19. Challenges in the Packaging of MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Malshe, A.P.; Singh, S.B.; Eaton, W.P.; O' Neal, C.; Brown, W.D.; Miller, W.M.

    1999-03-26

    The packaging of Micro-Electro-Mechanical Systems (MEMS) is a field of great importance to anyone using or manufacturing sensors, consumer products, or military applications. Currently much work has been done in the design and fabrication of MEMS devices but insufficient research and few publications have been completed on the packaging of these devices. This is despite the fact that packaging is a very large percentage of the total cost of MEMS devices. The main difference between IC packaging and MEMS packaging is that MEMS packaging is almost always application specific and greatly affected by its environment and packaging techniques such as die handling, die attach processes, and lid sealing. Many of these aspects are directly related to the materials used in the packaging processes. MEMS devices that are functional in wafer form can be rendered inoperable after packaging. MEMS dies must be handled only from the chip sides so features on the top surface are not damaged. This eliminates most current die pick-and-place fixtures. Die attach materials are key to MEMS packaging. Using hard die attach solders can create high stresses in the MEMS devices, which can affect their operation greatly. Low-stress epoxies can be high-outgassing, which can also affect device performance. Also, a low modulus die attach can allow the die to move during ultrasonic wirebonding resulting to low wirebond strength. Another source of residual stress is the lid sealing process. Most MEMS based sensors and devices require a hermetically sealed package. This can be done by parallel seam welding the package lid, but at the cost of further induced stress on the die. Another issue of MEMS packaging is the media compatibility of the packaged device. MEMS unlike ICS often interface with their environment, which could be high pressure or corrosive. The main conclusion we can draw about MEMS packaging is that the package affects the performance and reliability of the MEMS devices. There is a

  20. Listening to MEMS: An acoustic vibrometer

    NARCIS (Netherlands)

    Yntema, Doekle Reinder; Haneveld, J.; Engelen, Johannes Bernardus Charles; Brookhuis, Robert Anton; Sanders, Remco G.P.; Wiegerink, Remco J.; Elwenspoek, Michael Curt

    2010-01-01

    new way to characterize vibrating MEMS devices is presented. Using an acoustic particle velocity sensor the coupled sound field is measured, which is a measure for the movement of the MEMS device. We present several possible applications of this measurement method. It can be used as a read-out

  1. Listening to MEMS : An acoustic vibrometer

    NARCIS (Netherlands)

    Yntema, Doekle Reinder; Haneveld, J.; Engelen, Johannes Bernardus Charles; Brookhuis, Robert Anton; Sanders, Remco G.P.; Wiegerink, Remco J.; Elwenspoek, Michael Curt

    2010-01-01

    new way to characterize vibrating MEMS devices is presented. Using an acoustic particle velocity sensor the coupled sound field is measured, which is a measure for the movement of the MEMS device. We present several possible applications of this measurement method. It can be used as a read-out

  2. Comparison between MEM and Nott dynamic retinoscopy.

    Science.gov (United States)

    del Pilar Cacho, M; García-Muñoz, A; García-Bernabeu, J R; López, A

    1999-09-01

    The aim of this study was to compare MEM dynamic retinoscopy with the Nott method, to discover whether there were different results in the accommodative response and whether a relation exists between the two techniques. We performed MEM and Nott dynamic retinoscopy in 50 visually normal university students. Both methods were performed first on the basis of static retinoscopy and second with the result of the subjective refractive exam (binocular balancing). A statistically significant difference existed between the methods. Nott retinoscopy assessed on basis of the subjective refractive exam was the method that obtained the lowest amounts of accommodative lag (+0.42 D), whereas MEM method performed through the static retinoscopy result showed the highest accommodative lag (+0.94 D). Furthermore, correlation analysis showed that a linear relation existed between both methods, so that the Nott value was about one-half the value of the MEM retinoscopy. MEM dynamic retinoscopy showed greater lag than Nott retinoscopy.

  3. Optical MEMS for Earth observation

    Science.gov (United States)

    Liotard, Arnaud; Viard, Thierry; Noell, Wilfried; Zamkotsian, Frédéric; Freire, Marco; Guldimann, Benedikt; Kraft, Stefan

    2017-11-01

    Due to the relatively large number of optical Earth Observation missions at ESA, this area is interesting for new space technology developments. In addition to their compactness, scalability and specific task customization, optical MEMS could generate new functions not available with current technologies and are thus candidates for the design of future space instruments. Most mature components for space applications are the digital mirror arrays, the micro-deformable mirrors, the programmable micro diffraction gratings and tiltable micromirrors. A first selection of market-pull and techno-push concepts is done. In addition, some concepts are coming from outside Earth Observation. Finally two concepts are more deeply analyzed. The first concept is a programmable slit for straylight control for space spectro-imagers. This instrument is a push-broom spectroimager for which some images cannot be exploited because of bright sources in the field-of-view. The proposed concept consists in replacing the current entrance spectrometer slit by an active row of micro-mirrors. The MEMS will permit to dynamically remove the bright sources and then to obtain a field-of-view with an optically enhanced signal-to-noise ratio. The second concept is a push-broom imager for which the acquired spectrum can be tuned by optical MEMS. This system is composed of two diffractive elements and a digital mirror array. The first diffractive element spreads the spectrum. A micromirror array is set at the location of the spectral focal plane. By putting the micro-mirrors ON or OFF, we can select parts of field-of-view or spectrum. The second diffractive element then recombines the light on a push-broom detector. Dichroics filters, strip filter, band-pass filter could be replaced by a unique instrument.

  4. MEMS fundamental technology and applications

    CERN Document Server

    Choudhary, Vikas

    2013-01-01

    ""The book editors have managed to assemble a group of extraordinary authors to provide their expertise to this book. While giving an excellent overview of the history and the state of the art of MEMS technology, this book also focuses on current trends and topics such as gyroscopes that currently experience significant and increasing popularity in research and in industry. It is well written and the material is presented in a well-structured way making it easily accessible to any reader with a technical background.""-Boris Stoeber, The University of British Columbia, Vancouver, Canada<

  5. Development of MEMS photoacoustic spectroscopy

    Energy Technology Data Exchange (ETDEWEB)

    Robinson, Alex Lockwood; Eichenfield, Matthew S.; Griffin, Benjamin; Harvey, Heidi Alyssa; Nielson, Gregory N.; Okandan, Murat; Langlois, Eric; Resnick, Paul James; Shaw, Michael J.; Young, Ian; Givler, Richard C.; Reinke, Charles M.

    2014-01-01

    After years in the field, many materials suffer degradation, off-gassing, and chemical changes causing build-up of measurable chemical atmospheres. Stand-alone embedded chemical sensors are typically limited in specificity, require electrical lines, and/or calibration drift makes data reliability questionable. Along with size, these "Achilles' heels" have prevented incorporation of gas sensing into sealed, hazardous locations which would highly benefit from in-situ analysis. We report on development of an all-optical, mid-IR, fiber-optic based MEMS Photoacoustic Spectroscopy solution to address these limitations. Concurrent modeling and computational simulation are used to guide hardware design and implementation.

  6. 3-D Printing as an Effective Educational Tool for MEMS Design and Fabrication

    Science.gov (United States)

    Dahle, Reena; Rasel, Rafiul

    2016-01-01

    This paper presents a series of course modules developed as a high-impact and cost-effective learning tool for modeling and simulating the microfabrication process and design of microelectromechanical systems (MEMS) devices using three-dimensional (3-D) printing. Microfabrication technology is an established fabrication technique for small and…

  7. Micro electromechanical systems (MEMS) for mechanical engineers

    Energy Technology Data Exchange (ETDEWEB)

    Lee, A. P., LLNL

    1996-11-18

    The ongoing advances in Microelectromechanical Systems (MEMS) are providing man-kind the freedom to travel to dimensional spaces never before conceivable. Advances include new fabrication processes, new materials, tailored modeling tools, new fabrication machines, systems integration, and more detailed studies of physics and surface chemistry as applied to the micro scale. In the ten years since its inauguration, MEMS technology is penetrating industries of automobile, healthcare, biotechnology, sports/entertainment, measurement systems, data storage, photonics/optics, computer, aerospace, precision instruments/robotics, and environment monitoring. It is projected that by the turn of the century, MEMS will impact every individual in the industrial world, totaling sales up to $14 billion (source: System Planning Corp.). MEMS programs in major universities have spawned up all over the United States, preparing the brain-power and expertise for the next wave of MEMS breakthroughs. It should be pointed out that although MEMS has been initiated by electrical engineering researchers through the involvement of IC fabrication techniques, today it has evolved such that it requires a totally multi-disciplinary team to develop useful devices. Mechanical engineers are especially crucial to the success of MEMS development, since 90% of the physical realm involved is mechanical. Mechanical engineers are needed for the design of MEMS, the analysis of the mechanical system, the design of testing apparatus, the implementation of analytical tools, and the packaging process. Every single aspect of mechanical engineering is being utilized in the MEMS field today, however, the impact could be more substantial if more mechanical engineers are involved in the systems level designing. In this paper, an attempt is made to create the pathways for a mechanical engineer to enter in the MEMS field. Examples of application in optics and medical devices will be used to illustrate how mechanical

  8. Optical MEMS and MOEMS for telecommunications

    Science.gov (United States)

    Mounier, Eric

    2003-03-01

    This article will present the technologies and markets trends, as well as the latest R&D developments, in MEMS and MOEMS for optical telecom. Today, the MEMS technology has found the optical telecommunication market as a new "killer applications" (following the IT, automotive and medical markets). This overview will describe the current state-of-the-art in MEMS manufacturing for optical functions in optical networks. Switching is a crucial function in the future all-optical networks and MEMS and MOEMS are ideal candidates for this. After an over-estimation of the needs in optical switching in 2000, components manufacturers are today targeting market where low and medium size switches are needed. In this article, a specific focus on switching will be made with comparison between the MEMS technology and others switching technologies (thermo-optical, LC, holography...). The current industrial offer for MEMS (3D, 2D and 1D) will be described. The presentation will also give market figures and forecast for MEMS and MOEMS in optical telecom.

  9. Optical inspection of hidden MEMS structures

    Science.gov (United States)

    Krauter, Johann; Gronle, Marc; Osten, Wolfgang

    2017-06-01

    Micro-electro-mechanical system's (MEMS) applications have greatly expanded over the recent years, and the MEMS industry has grown almost exponentially. One of the strongest drivers are the automotive and consumer markets. A 100% test is necessary especially in the production of automotive MEMS sensors since they are subject to safety relevant functions. This inspection should be carried out before dicing and packaging since more than 90% of the production costs are incurred during these steps. An electrical test is currently being carried out with each MEMS component. In the case of a malfunction, the defect can not be located on the wafer because the MEMS are no longer optically accessible due to the encapsulation. This paper presents a low coherence interferometer for the topography measurement of MEMS structures located within the wafer stack. Here, a high axial and lateral resolution is necessary to identify defects such as stuck or bent MEMS fingers. First, the boundary conditions for an optical inspection system will be discussed. The setup is then shown with some exemplary measurements.

  10. Design of Surface Micromachined Compliant MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Bradley, Joe Anthony [Iowa State Univ., Ames, IA (United States)

    2002-12-31

    The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a micro-compliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMs, most have used comb-drive actuation methods and bulk micromachining processes. This research focused on fully-compliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms.

  11. Design of Surface micromachined Compliant MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Bradley, Joe Anthony [Iowa State Univ., Ames, IA (United States)

    2001-01-01

    The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a micro-compliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMS, most have used comb-drive actuation methods and bulk micromachining processes. This research focuses on fully-compliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms.

  12. Sleep estimates using microelectromechanical systems (MEMS).

    Science.gov (United States)

    te Lindert, Bart H W; Van Someren, Eus J W

    2013-05-01

    Although currently more affordable than polysomnography, actigraphic sleep estimates have disadvantages. Brand-specific differences in data reduction impede pooling of data in large-scale cohorts and may not fully exploit movement information. Sleep estimate reliability might improve by advanced analyses of three-axial, linear accelerometry data sampled at a high rate, which is now feasible using microelectromechanical systems (MEMS). However, it might take some time before these analyses become available. To provide ongoing studies with backward compatibility while already switching from actigraphy to MEMS accelerometry, we designed and validated a method to transform accelerometry data into the traditional actigraphic movement counts, thus allowing for the use of validated algorithms to estimate sleep parameters. Simultaneous actigraphy and MEMS-accelerometry recording. Home, unrestrained. Fifteen healthy adults (23-36 y, 10 males, 5 females). None. Actigraphic movement counts/15-sec and 50-Hz digitized MEMS-accelerometry. Passing-Bablok regression optimized transformation of MEMS-accelerometry signals to movement counts. Kappa statistics calculated agreement between individual epochs scored as wake or sleep. Bland-Altman plots evaluated reliability of common sleep variables both between and within actigraphs and MEMS-accelerometers. Agreement between epochs was almost perfect at the low, medium, and high threshold (kappa = 0.87 ± 0.05, 0.85 ± 0.06, and 0.83 ± 0.07). Sleep parameter agreement was better between two MEMS-accelerometers or a MEMS-accelerometer and an actigraph than between two actigraphs. The algorithm allows for continuity of outcome parameters in ongoing actigraphy studies that consider switching to MEMS-accelerometers. Its implementation makes backward compatibility feasible, while collecting raw data that, in time, could provide better sleep estimates and promote cross-study data pooling.

  13. Design of a Novel MEMS Gyroscope Array

    OpenAIRE

    Wang, Wei; Lv, Xiaoyong; Sun, Feng

    2013-01-01

    This paper reports a novel four degree-of-freedom (DOF) MEMS vibratory gyroscope. A MEMS gyroscope array is then presented using the novel gyroscope unit. In the design of the proposed 4-DOF MEMS vibratory gyroscope, the elements of the drive-mode are set inside the whole gyroscope architecture, and the elements of sense-mode are set around the drive-mode, which thus makes it possible to combine several gyroscope units into a gyroscope array through sense-modes of all the units. The complete ...

  14. Pressure reciprocity calibration of a MEMS microphone.

    Science.gov (United States)

    Wagner, Randall P; Fick, Steven E

    2017-09-01

    This article reports the first use of the pressure reciprocity technique to calibrate a micro-electromechanical system (MEMS) microphone. This standardized primary calibration method is conventionally used to calibrate laboratory standard microphones. Results for the pressure reciprocity calibration of a MEMS microphone and two laboratory standard microphones are presented for the frequency range 100-10 000 Hz. Because the amplifier in the MEMS microphone package prevents reciprocal operation, this microphone was used only as a receiver of sound. A description of the procedure is presented along with checks of the measurement results and data regarding the uncertainties of these results.

  15. Adhesion aspects in MEMS/NEMS

    CERN Document Server

    Kim, Seong H; Mittal, Kash L

    2012-01-01

    Phenomena associated with the adhesion interaction of surfaces have been a critical aspect of micro- and nanosystem development and performance since the first MicroElectroMechanicalSystems(MEMS) were fabricated. These phenomena are ubiquitous in nature and are present in all systems, however MEMS devices are particularly sensitive to their effects owing to their small size and limited actuation force that can be generated. Extension of MEMS technology concepts to the nanoscale and development of NanoElectroMechanicalSystems(NEMS) will result in systems even more strongly influenced by surface

  16. Practical guide to RF-MEMS

    CERN Document Server

    Iannacci, Jacopo

    2013-01-01

    Closes the gap between hardcore-theoretical and purely experimental RF-MEMS books. The book covers, from a practical viewpoint, the most critical steps that have to be taken in order to develop novel RF-MEMS device concepts. Prototypical RF-MEMS devices, both including lumped components and complex networks, are presented at the beginning of the book as reference examples, and these are then discussed from different perspectives with regard to design, simulation, packaging, testing, and post-fabrication modeling. Theoretical concepts are introduced when necessary to complement the practical

  17. MEMS-based Circuits and Systems for Wireless Communication

    CERN Document Server

    Kaiser, Andreas

    2013-01-01

    MEMS-based Circuits and Systems for Wireless Communication provides comprehensive coverage of RF-MEMS technology from device to system level. This edited volume places emphasis on how system performance for radio frequency applications can be leveraged by Micro-Electro-Mechanical Systems (MEMS). Coverage also extends to innovative MEMS-aware radio architectures that push the potential of MEMS technology further ahead.  This work presents a broad overview of the technology from MEMS devices (mainly BAW and Si MEMS resonators) to basic circuits, such as oscillators and filters, and finally complete systems such as ultra-low-power MEMS-based radios. Contributions from leading experts around the world are organized in three parts. Part I introduces RF-MEMS technology, devices and modeling and includes a prospective outlook on ongoing developments towards Nano-Electro-Mechanical Systems (NEMS) and phononic crystals. Device properties and models are presented in a circuit oriented perspective. Part II focusses on ...

  18. Wireless MEMs BioSensor Project

    Data.gov (United States)

    National Aeronautics and Space Administration — Crossfield is proposing to develop a low cost, single chip plant bio-monitor using an embedded MEMs based infrared (IR) spectroscopy gas sensor for carbon dioxide...

  19. MEMS Gyroscope with Interferometric Detection Project

    Data.gov (United States)

    National Aeronautics and Space Administration — The proposed innovation is a novel MEMS gyroscope that uses micro-interferometric detection to measure the motion of the proof mass. Using an interferometric...

  20. MEMS Gyroscope with Interferometric Detection Project

    Data.gov (United States)

    National Aeronautics and Space Administration — This SBIR Phase I project will develop a MEMS gyroscope that uses an ultra high resolution sensing technique for measuring proof mass motion. The goal is to...

  1. Picometer-Resolution MEMS Segmented DM Project

    Data.gov (United States)

    National Aeronautics and Space Administration — Microelectromechanical systems (MEMS) technology has the potential to create deformable mirrors (DM) with 10^4 actuators that have size, weight, and power...

  2. MEMS Shutter for Spectrometer Calibration Project

    Data.gov (United States)

    National Aeronautics and Space Administration —   We shall develop a MEMS shutter that is expected to have 2-3 g mass and consumeThis research will demonstrate fabrication of a low mass (~2-3 grams), low...

  3. Optical MEMS for chemical analysis and biomedicine

    CERN Document Server

    Jiang, Hongrui

    2016-01-01

    This book describes the current state of optical MEMS in chemical and biomedical analysis and brings together current trends and highlights topics representing the most exciting progress in recent years in the field.

  4. Fabrication of integrated metallic MEMS devices

    DEFF Research Database (Denmark)

    Yalcinkaya, Arda Deniz; Ravnkilde, Jan Tue; Hansen, Ole

    2002-01-01

    A simple and complementary metal oxide semiconductor (CMOS) compatible fabrication technique for microelectromechanical (MEMS) devices is presented. The fabrication technology makes use of electroplated metal layers. Among the fabricated devices, high quality factor microresonators...

  5. Reaction Wheel with Embedded MEMS IMU Project

    Data.gov (United States)

    National Aeronautics and Space Administration — The innovation is to embed a MEMS IMU Sensor Chip into a reaction wheel to measure its spin rate as well as wheel attitude rate. We propose to use a reaction wheel...

  6. MEMS and Nano-Technology Clean Room

    Data.gov (United States)

    Federal Laboratory Consortium — The MEMS and Nano-Technology Clean Room is a state-of-the-art, 800 square foot, Class 1000-capable facility used for development of micro and sub-micro scale sensors...

  7. Stacked Integration of MEMS on LSI

    Directory of Open Access Journals (Sweden)

    Masayoshi Esashi

    2016-08-01

    Full Text Available Two stacked integration methods have been developed to enable advanced microsystems of microelectromechanical systems (MEMS on large scale integration (LSI. One is a wafer level transfer of MEMS fabricated on a carrier wafer to a LSI wafer. The other is the use of electrical interconnections using through-Si vias from the structure of a MEMS wafer on a LSI wafer. The wafer level transfer methods are categorized to film transfer, device transfer connectivity last, and immediate connectivity at device transfer. Applications of these transfer methods are film bulk acoustic resonator (FBAR on LSI, lead zirconate titanate (Pb(Zr,TiO3 (PZT MEMS switch on LSI, and surface acoustic wave (SAW resonators on LSI using respective methods. A selective transfer process was developed for multiple SAW filters on LSI. Tactile sensors and active matrix electron emitters for massive parallel electron beam lithography were developed using the through-Si vias.

  8. MEMS Sensors and Actuators Laboratory (MSAL)

    Data.gov (United States)

    Federal Laboratory Consortium — The MEMS Sensors and Actuators Laboratory (MSAL) in the A.J. Clark School of Engineering at the University of Maryland (UMD) was established in January 2000. Our lab...

  9. Printing systems for MEMS packaging

    Science.gov (United States)

    Hayes, Donald J.; Cox, Weldon R.; Wallace, David B.

    2001-10-01

    Ink-jet printing technology is, in many ways, ideally suited for addressing a number of these MEMS device packaging challenges. The general advantages of this form of microdispensing derive from the incorporation of data-driven, non-contact processes which enable precise, picoliter-level volumes of material to be deposited with high accuracy and speed at target sites, even on non-planar surfaces. Being data-driven, microjet printing is a highly flexible and automated process which may readily be incorporated into manufacturing lines. It does not require application-specific tooling such as photomasks or screens, and, as an additive process with no chemical waste, it is environmentally friendly. In short, the advantages obtainable with incorporation of micro-jet printing technology in many fabrication applications range from increased process capability, integration and automation to reduced manufacturing costs.

  10. MEMS technologies for artificial retinas

    Science.gov (United States)

    Mokwa, Wilfried

    2010-02-01

    The mostly cause of blindness in the developed countries is a degeneration of the retina. For restoring this loss of vision one possible approach is the substitution of the lost functions by means of an electronic implant. This approach is based on MEMS technologies. It has been shown that electrical stimulation of retinal ganglion cells yield visual sensations1. Therefore, an artificial retina for blind humans based on this concept seems to be feasible. Besides electrical stimulation of retinal ganglion cells also the direct electrical stimulation of the optic nerve2 and the visual cortex3 have been under investigation. This paper wants to give an overview about the activities on the retinal ganglion cell stimulation.

  11. MEMS direction finding acoustic sensor

    Science.gov (United States)

    Karunasiri, Gamani; Alves, Fabio; Swan, William

    2017-06-01

    Conventional directional sound sensing systems employ an array of spatially separated microphones to achieve directivity. However, there are insects such as the Ormia ochracea fly that can determine the direction of sound using a miniature hearing organ much smaller than the wavelength of sound it detects. The fly's eardrums are coupled mechanically with a separation of only 0.5 mm and yet have a remarkable sensitivity to the direction of sound. The MEMS based sensor mimicking the fly's hearing system was fabricated using an SOI substrate with a 25 μm device layer. The sensor consists of two 1.5 mm x1.6 mm wings connected in the middle by a 2.7 mm x 30 μm bridge. The entire structure is connected to the substrate by two torsional legs at the center. The frequency response of the sensor showed two resonance frequencies at approximately 1.1 kHz (rocking) and 1.5 kHz (bending). The resonance at 1.1 kHz is due to rocking of the wings by twisting the legs and the other at 1.5 kHz is due to bending of the bridge. The response of the sensor was probed electronically using comb finger capacitors integrated to the edges of the wings and with the help of an MS3110 chip. A peak output voltage of about 9V/Pa was measured for sound incident normal to the device at the resonance frequency of the bending mode. The bearing of the incident sound under these conditions could be determined to within a few degrees. These findings indicate the potential use of the MEMS sensor to locate sound sources with high accuracy.

  12. Nano-tribology and materials in MEMS

    CERN Document Server

    Satyanarayana, N; Lim, Seh

    2013-01-01

    This book brings together recent developments in the areas of MEMS tribology, novel lubricants and coatings for nanotechnological applications, biomimetics in tribology and fundamentals of micro/nano-tribology. Tribology plays important roles in the functioning and durability of machines at small length scales because of the problems associated with strong surface adhesion, friction, wear etc. Recently, a number of studies have been conducted to understand tribological phenomena at nano/micro scales and many new tribological solutions for MEMS have been proposed.

  13. Digital holography for MEMS and microsystem metrology

    CERN Document Server

    Asundi, Anand

    2011-01-01

    Approaching the topic of digital holography from the practical perspective of industrial inspection, Digital Holography for MEMS and Microsystem Metrology describes the process of digital holography and its growing applications for MEMS characterization, residual stress measurement, design and evaluation, and device testing and inspection. Asundi also provides a thorough theoretical grounding that enables the reader to understand basic concepts and thus identify areas where this technique can be adopted. This combination of both practical and theoretical approach will ensure the

  14. A novel piezoresistive polymer nanocomposite MEMS accelerometer

    Science.gov (United States)

    Seena, V.; Hari, K.; Prajakta, S.; Pratap, Rudra; Ramgopal Rao, V.

    2017-01-01

    A novel polymer MEMS (micro electro mechanical systems) accelerometer with photo-patternable polymer nanocomposite as a piezoresistor is presented in this work. Polymer MEMS Accelerometer with beam thicknesses of 3.3 µm and embedded nanocomposite piezoresistive layer having a gauge factor of 90 were fabricated. The photosensitive nanocomposite samples were prepared and characterized for analyzing the mechanical and electrical properties and thereby ensuring proper process parameters for incorporating the piezoresistive layer into the polymer MEMS accelerometer. The microfabrication process flow and unit processes followed are extremely low cost with process temperatures below 100 °C. This also opens up a new possibility for easy integration of such polymer MEMS with CMOS (complementary metal oxide semiconductor) devices and circuits. The fabricated devices were characterized using laser Doppler vibrometer (LDV) and the devices exhibited a resonant frequency of 10.8 kHz and a response sensitivity of 280 nm g-1 at resonance. The main focus of this paper is on the SU-8/CB nanocomposite piezoresistive MEMS accelerometer technology development which covers the material and the fabrication aspects of these devices. CoventorWare FEA analysis performed using the extracted material properties from the experimental characterization which are in close agreement to performance parameters of the fabricated devices is also discussed. The simulated piezoresistive polymer MEMS devices showed an acceleration sensitivity of 126 nm g-1 and 82 ppm of ΔR/R per 1 g of acceleration.

  15. Challenges in the Packaging of MEMS

    Energy Technology Data Exchange (ETDEWEB)

    BROWN, WILLIAM D.; EATON, WILLIAM P.; MALSHE, AJAY P.; MILLER, WILLIAM M.; O' NEAL, CHAD; SINGH, SUSHILA B.

    1999-09-24

    Microelectromechanical Systems (MEMS) packaging is much different from conventional integrated circuit (IC) packaging. Many MEMS devices must interface to the environment in order to perform their intended function, and the package must be able to facilitate access with the environment while protecting the device. The package must also not interfere with or impede the operation of the MEMS device. The die attachment material should be low stress, and low outgassing, while also minimizing stress relaxation overtime which can lead to scale factor shifts in sensor devices. The fabrication processes used in creating the devices must be compatible with each other, and not result in damage to the devices. Many devices are application specific requiring custom packages that are not commercially available. Devices may also need media compatible packages that can protect the devices from harsh environments in which the MEMS device may operate. Techniques are being developed to handle, process, and package the devices such that high yields of functional packaged parts will result. Currently, many of the processing steps are potentially harmful to MEMS devices and negatively affect yield. It is the objective of this paper to review and discuss packaging challenges that exist for MEMS systems and to expose these issues to new audiences from the integrated circuit packaging community.

  16. From MEMS to NEMS with carbon.

    Science.gov (United States)

    Wang, Chunlei; Madou, Marc

    2005-04-15

    Our work in carbon-microelectromechanical systems (C-MEMS) suggests that C-MEMS might provide a very interesting material and microfabrication approach to battery miniaturization, active DNA arrays and a wide variety of chemical and biological sensors. In C-MEMS, photoresist is patterned by photolithography and subsequently pyrolyzed at high-temperatures in an oxygen-free environment. We established that it is possible to use C-MEMS to create very high-aspect ratio carbon structures (e.g. posts with an aspect ratio >10), suspended carbon plates and suspended carbon nanowires (C-NEMS). By changing the lithography conditions, soft and hard baking times and temperatures, additives to the resist, pyrolysis time, temperature and environment, C-MEMS permits a wide variety of interesting new MEMS and NEMS applications that employ structures having a wide variety of shapes, resistivities and mechanical properties. We also demonstrate that arrays of high-aspect ratio carbon posts can be charged/discharged with Li and this enables the fabrication of a smart switchable array of batteries.

  17. Laser Interferometry for Harsh Environment MEMS Sensors

    Science.gov (United States)

    Nieva, Patricia

    2008-03-01

    Silicon-based MEMS technology has enabled the fabrication of a broad range of sensor and actuator systems that are having a great impact in areas that benefit from miniaturization and increased functionality. The main advantage of Si-based MEMS technologies is their possibility of integration with microelectronics thus allowing the economical production of smart microsystems. In the automotive industry for example, there is a need for inexpensive smart MEMS sensors for engine control applications. For instance, smart MEMS sensors capable of operating ``in cylinder'', where temperatures are around 400 C, could continuously monitor the combustion quality of the cylinders of automotive engines thus leading to reduced emissions and improved fuel economy. However, when the environment temperature is too high (>180 C), conventional Si-based microelectronics suffer from severe performance degradation, thus making smart Si-based MEMS impractical. Hence, further development, in terms of new MEMS materials and/or new technologies, is needed especially where high temperature capability is crucial to realizing improved electronic control. Remote sensing through optical signal detection has major advantages for safe signal transmission in harsh environments. It is highly resistant to electromagnetic interference (EMI) and radio frequency interference (RFI) and at the same time, it eliminates the necessity of on-board electronics, which has been one of the main obstacles in the development of smart MEMS sensors for high temperature applications. An economical way to deal with higher temperatures and other aggressive environmental conditions is to build MEMS sensors out of robust materials (e.g. Silicon nitride, SiC) and integrate them with optical signal detection techniques to form MOEMS. In this paper, we review recent trends for the use of laser interferometry for MEMS sensors in the context of using them for high temperature applications. Technological challenges faced in

  18. MEMS-BASED OSCILLATORS: A REVIEW

    Directory of Open Access Journals (Sweden)

    Jamilah Karim

    2014-05-01

    Full Text Available ABSTRACT: This paper presents an overview of microelectromechanical (MEMS based oscillators. The accuracy and stability of the reference frequency will normally limit the performance of most wireless communication systems. MEMS technology is the technology of choice due to its compatibility to silicon, leading to integration with circuits and lowering power consumption. MEMS based oscillators also provide the potential of a fully integrated transceiver. The most commonly used topology for MEMS based oscillators are pierce oscillator circuit topology and TIA circuit topology. Both topologies result in very competitive output in terms of phase noise and power consumption.  They can be used for either higher or lower Rx. The major difference between both topologies is the number of transistors used. TIA circuit used more number of transistor compare to pierce circuit. Thus design complexity of the TIA is higher. Pierce circuit is simpler, provide straightforward biasing and easier to design. The highly integratable of MEMS-based oscillators have made them much needed in future multiband wireless system. So that future wireless systems are able to function globally without any problem. ABSTRAK: Kertas kerja ini membentangkan gambaran keseluruhan mikroelektromekanikal (MEMS berdasarkan pengayun.  Ketepatan dan kestabilan frekuensi rujukan sering membataskan perlaksanaan kebanyakan sistem komunikasi tanpa wayar. Teknologi MEMS merupakan teknologi pilihan memandangkan ia serasi dengan silikon; membolehkan integrasi dengan litar dan penggunaan tenaga yang rendah.  Pengayun berdasarkan MEMS juga  berpotensi sebagai integrasi penuh penghantar-terima. Topologi yang sering digunakan untuk pengayun berdasarkan MEMS adalah topologi litar pengayun pencantas dan topologi litar TIA.  Keputusan bagi kedua-dua topologi adalah amat kompetitif dari segi fasa bunyi dan penggunaan tenaga. Ia boleh digunakan untuk meninggikan atau merendahkan Rx. Perbezaan utama

  19. A review of vibration-based MEMS piezoelectric energy harvesters

    Energy Technology Data Exchange (ETDEWEB)

    Saadon, Salem; Sidek, Othman [Collaborative Microelectronic Design Excellence Center (CEDEC), School of Electrical and Electronic Engineering, Universiti Sains Malaysia, Engineering Campus, 14300 Nibong Tebal, Seberang Perai Selatan, Pulau Pinang (Malaysia)

    2011-01-15

    The simplicity associated with the piezoelectric micro-generators makes it very attractive for MEMS applications, especially for remote systems. In this paper we reviewed the work carried out by researchers during the last three years. The improvements in experimental results obtained in the vibration-based MEMS piezoelectric energy harvesters show very good scope for MEMS piezoelectric harvesters in the field of power MEMS in the near future. (author)

  20. Characterization of Capacitive Comb-finger MEMS Accelerometers

    OpenAIRE

    Joshi, Aaditi; Redkar, Sangram; Sugar, Thomas

    2015-01-01

    This paper discusses various methods for testing the performance of MEMS capacitive comb-finger accelerometers manufactured by Sandia National Laboratories. The use of Capacitive MEMS devices requires complex circuits for measurement of capacitance. Sandia MEMS accelerometer's capacitance changes in a very small femto-farad (fF) range. The performance of accelerometer is tested using Analog Devices AD7747 sigma-delta capacitance to digital converter. The response of a MEMS capacitive accelero...

  1. Commercializing MEMS--too fast or too slow?

    Science.gov (United States)

    Walsh, Steven T.; Carr, William N.; Mados, Hillary; Narang, Divjot S.

    1996-09-01

    MEMS as a technology base is coming of age, but as in any vital process growing pains occur. Commercializing MEMS is simultaneously viewed as agonizingly slow by many of its promoters and lightingly quick by many companies whose products are being replaced with MEMS based substitutes. This effort ties current efforts in market analysis, technology evaluations, competency based strategy in an effort to understand the pace of MEMS commercialization.

  2. Testing reliability of MEMS materials in liquids

    Science.gov (United States)

    Kuehn, Thomas P.; Ali, S. Mubassar; Mantell, Susan C.; Longmire, Ellen K.

    2007-01-01

    MEMS are increasingly being considered for applications that involve immersion in liquids. However, there are very little reliability data for MEMS structures in liquids environments. In this study, an apparatus was developed which enables the investigation of fatigue failure of MEMS in liquids. MEMS cantilever beams were mounted on a PZT piezoelectric actuator and immersed in a liquid. A laser is reflected off the tip of the vibrating cantilever and onto a position-sensing photo-diode device (PSD) to obtain position data. From this data resonance frequency can be extracted for long-term monitoring. Cantilevers are resonated for at least 10 8 cycles. This apparatus allows for the testing of many combinations of materials and environments. For this study, the fatigue performance in liquid of silicon nitride cantilever beams was evaluated and compared to single crystal silicon cantilever beams. Tests were conducted in deionized water and a saline solution. Silicon nitride exhibited no long-term degradation of resonance frequency within measurement limits in air, DI water, and saline environments. Silicon exhibited a steady decrease in resonance. Results showed that this method could be extended to conduct reliability studies on other MEMS materials.

  3. BioMEMS in drug delivery.

    Science.gov (United States)

    Nuxoll, Eric

    2013-11-01

    The drive to design micro-scale medical devices which can be reliably and uniformly mass produced has prompted many researchers to adapt processing technologies from the semiconductor industry. By operating at a much smaller length scale, the resulting biologically-oriented microelectromechanical systems (BioMEMS) provide many opportunities for improved drug delivery: Low-dose vaccinations and painless transdermal drug delivery are possible through precisely engineered microneedles which pierce the skin's barrier layer without reaching the nerves. Low-power, low-volume BioMEMS pumps and reservoirs can be implanted where conventional pumping systems cannot. Drug formulations with geometrically complex, extremely uniform micro- and nano-particles are formed through micromolding or with microfluidic devices. This review describes these BioMEMS technologies and discusses their current state of implementation. As these technologies continue to develop and capitalize on their simpler integration with other MEMS-based systems such as computer controls and telemetry, BioMEMS' impact on the field of drug delivery will continue to increase. © 2013.

  4. A Nuclear Microbattery for MEMS Devices

    Energy Technology Data Exchange (ETDEWEB)

    Blanchard, James; Henderson, Douglass; Lal, Amit

    2002-08-20

    This project was designed to demonstrate the feasibility of producing on-board power for MEMS devices using radioisotopes. MEMS is a fast growing field, with hopes for producing a wide variety of revolutionary applications, including ''labs on a chip,'' micromachined scanning tunneling microscopes, microscopic detectors for biological agents, microsystems for DNA identification, etc. Currently, these applications are limited by the lack of an on-board power source. Research is ongoing to study approaches such as fuel cells, fossil fuels, and chemical batteries, but all these concepts have limitations. For long-lived, high energy density applications, on-board radioisotope power offers the best choice. We have succeeded in producing such devices using a variety of isotopes, incorporation methods, and device geometries. These experiments have demonstrated the feasibility of using radioisotope power and that there are a variety of options available for MEMS designers. As an example of an integrated, self-powered application, we have created an oscillating cantilever beam that is capable of consistent, periodic oscillations over very long time periods without the need for refueling. Ongoing work will demonstrate that this cantilever is capable of radio frequency transmission, allowing MEMS devices to communicate with one another wirelessly. Thus, this will be the first self-powered wireless transmitter available for use in MEMS devices, permitting such applications as sensors embedded in buildings for continuous monitoring of the building performance and integrity.

  5. Optically pumped 1550nm wavelength tunable MEMS VCSEL

    DEFF Research Database (Denmark)

    Sahoo, Hitesh Kumar; Ansbæk, Thor; Ottaviano, Luisa

    2016-01-01

    The paper presents the design and fabrication of an optically pumped 1550nm tunable MEMS VCSEL with anenclosed MEMS. The MEMS is defined in SOI and the active material, an InP wafer with quantum wells arebonded to the SOI and the last mirror is made from the deposition of dielectric materials...

  6. Vacuum maintenance in hermetically sealed MEMs packages

    Science.gov (United States)

    Corazza, Alessio; Kullberg, Richard C.

    1998-09-01

    Packages for many high sensitivity MEM devices (Micro- Electro-Mechanical devices) such as accelerometers need to operate in a vacuum in order to obtain their full performance. This vacuum is destroyed by the outgassing of species such as hydrogen and water vapor from the surfaces of the package exposed to this vacuum. To control this outgassing a getter is needed. MEM packages are too small to accommodate traditional sintered porous getters. A solution has been developed using a high porosity thick film getter material. The getter consists of a highly porous, mechanically stable, getter coating on a metal substrate. This getter reacts with active gases such as water vapor, hydrogen, oxygen, nitrogen, and carbon monoxide that outgas from the inner surfaces of the package. The physical characteristics and performance of this material will be demonstrated per ASTM sorption testing. The results of this testing will be used to demonstrate the potential for vacuum performance in a real world MEM package.

  7. MEMS tunable grating micro-spectrometer

    Science.gov (United States)

    Tormen, Maurizio; Lockhart, R.; Niedermann, P.; Overstolz, T.; Hoogerwerf, A.; Mayor, J.-M.; Pierer, J.; Bosshard, C.; Ischer, R.; Voirin, G.; Stanley, R. P.

    2017-11-01

    The interest in MEMS based Micro-Spectrometers is increasing due to their potential in terms of flexibility as well as cost, low mass, small volume and power savings. This interest, especially in the Near-Infrared and Mid- Infrared, ranges from planetary exploration missions to astronomy, e.g. the search for extra solar planets, as well as to many other terrestrial fields of application such as, industrial quality and surface control, chemical analysis of soil and water, detection of chemical pollutants, exhausted gas analysis, food quality control, process control in pharmaceuticals, to name a few. A compact MEMS-based Spectrometer for Near- Infrared and Mid-InfraRed operation have been conceived, designed and demonstrated. The design based on tunable MEMS blazed grating, developed in the past at CSEM [1], achieves state of the art results in terms of spectral resolution, operational wavelength range, light throughput, overall dimensions, and power consumption.

  8. VCSELs for interferometric readout of MEMS sensors

    Science.gov (United States)

    Serkland, Darwin K.; Geib, Kent M.; Peake, Gregory M.; Keeler, Gordon A.; Shaw, Michael J.; Baker, Michael S.; Okandan, Murat

    2016-03-01

    We report on the development of single-frequency VCSELs (vertical-cavity surface-emitting lasers) for sensing the position of a moving MEMS (micro-electro-mechanical system) object with resolution much less than 1nm. Position measurement is the basis of many different types of MEMS sensors, including accelerometers, gyroscopes, and pressure sensors. Typically, by switching from a traditional capacitive electronic readout to an interferometric optical readout, the resolution can be improved by an order of magnitude with a corresponding improvement in MEMS sensor performance. Because the VCSEL wavelength determines the scale of the position measurement, laser wavelength (frequency) stability is desirable. This paper discusses the impact of VCSEL amplitude and frequency noise on the position measurement.

  9. Fotografia E Memória

    OpenAIRE

    Tacca, Fernando de; Instituto de Artes (IA/Unicamp).

    2013-01-01

    A edição temática sobre Fotografia e Memória abre uma nova etapa da revista Resgate, do Centro de Memória - Unicamp, na qual identificamos um sentimento legítimo e um lugar de pertencimento para as questões da memória através do conjunto de reflexões e apresentações de resultados de pesquisa com o fotográfico ora publicados. Os estudos fotográficos em nosso país passam por um período muito fértil e com volume considerável de mestrados e doutorados, além de livros e periódicos, presentes em mu...

  10. Vortex Anemometer Using MEMS Cantilever Sensor

    CERN Document Server

    Zylka, P; Zylka, Pawel; Modrzynski, Pawel

    2010-01-01

    This paper presents construction and performance of a novel hybrid microelectromechanical system (MEMS) vortex flowmeter. A miniature cantilever MEMS displacement sensor was used to detect frequency of vortices development. 3-mm-long silicon cantilever, protruding directly out of a trailing edge of a trapezoidal glass-epoxy composite bluff body was put into oscillatory motion by vortices shed alternately from side surfaces of the obstacle. Verified linearmeasurement range of the device extended from 5 to 22 m/s; however, it could be broadened in absence of external 50-Hz mains electrical interfering signal which required bandpass frequency-domain digital sensor signal processing. The MEMS vortex sensor proved its effectiveness in detection of semilaminar airflow velocity distribution in a 40-mm-diameter tubular pipe.

  11. Enabling technology for MEMS and nanodevices

    CERN Document Server

    Baltes, Henry; Fedder, Gary K; Hierold, Christofer; Korvink, Jan G; Tabata, Osamu

    2013-01-01

    This softcover edition of the eponymous volume from the successful ""Advanced Micro & Nanosystems"" series covers all aspects of fabrication of MEMS under CMOS-compatible conditions from design to implementation.It examines the various routes and methods to combine electronics generated by the CMOS technology with novel micromechanical parts into one-chip solutions. Various approaches, fundamental and technological aspects as well as strategies leading to different types of functionalities and presented in detail.For the practicing engineer as well as MSc and PhD students on MEMS cours

  12. Design and simulation of MEMS capacitive magnetometer

    Science.gov (United States)

    Jyoti, Aditi, Tripathi, C. C.; Gopal, Ram

    2016-04-01

    This paper presents the design and simulation of a MEMS Capacitive Magnetometer using FEM (Finite Element Method) tool COMSOL Multiphysics 4.3b and results from this simulation are closely matched with analytically calculated results. A comb drive structure is used for actuation purpose which operates at resonant frequency of device is 11.791 kHz to achieve maximum displacement. A magnetic field in z-axis can be detected by this comb drive structure. Quality factor of MEMS capacitive magnetometer obtained is 18 and it has good linear response in the magnetic field range of 100 µT.

  13. RF MEMS theory, design, and technology

    CERN Document Server

    Rebeiz, Gabriel M

    2003-01-01

    Ultrasmall Radio Frequency and Micro-wave Microelectromechanical systems (RF MEMs), such as switches, varactors, and phase shifters, exhibit nearly zero power consumption or loss. For this reason, they are being developed intensively by corporations worldwide for use in telecommunications equipment. This book acquaints readers with the basics of RF MEMs and describes how to design practical circuits and devices with them. The author, an acknowledged expert in the field, presents a range of real-world applications and shares many valuable tricks of the trade.

  14. Hermeticity testing of MEMS and microelectronic packages

    CERN Document Server

    Costello, Suzanne

    2013-01-01

    Packaging of microelectronics has been developing since the invention of the transistor in 1947. With the increasing complexity and decreasing size of the die, packaging requirements have continued to change. A step change in package requirements came with the introduction of the Micro-Electro-Mechanical System (MEMS) whereby interactions with the external environment are, in some cases, required.This resource is a rapid, definitive reference on hermetic packaging for the MEMS and microelectronics industry, giving practical guidance on traditional and newly developed test methods. This book in

  15. MEM application to IRAS CPC images

    Science.gov (United States)

    Marston, A. P.

    1994-01-01

    A method for applying the Maximum Entropy Method (MEM) to Chopped Photometric Channel (CPC) IRAS additional observations is illustrated. The original CPC data suffered from problems with repeatability which MEM is able to cope with by use of a noise image, produced from the results of separate data scans of objects. The process produces images of small areas of sky with circular Gaussian beams of approximately 30 in. full width half maximum resolution at 50 and 100 microns. Comparison is made to previous reconstructions made in the far-infrared as well as morphologies of objects at other wavelengths. Some projects with this dataset are discussed.

  16. First MEM task IRMEO in IRAF

    Science.gov (United States)

    Wu, Nailong

    1992-01-01

    The first task for image restoration using the Maximum Entropy Method (MEM) in IRAF, called IRMEO, is described. The underlining algorithm is the approximate Newton method for optimization. The basic input images and parameters for deconvolution are described in some detail. Results of preliminary tests, including the number of iterations, required CPU time on a variety of computers, and deconvolved images are reported and compared with those from other deconvolution methods. The merits and limitations of this task are pointed out. The possible development of better MEM tasks on the basis of IRMEO is also discussed.

  17. MEMS for medical technology applications

    Science.gov (United States)

    Frisk, Thomas; Roxhed, Niclas; Stemme, Göran

    2007-01-01

    This paper gives an in-depth description of two recent projects at the Royal Institute of Technology (KTH) which utilize MEMS and microsystem technology for realization of components intended for specific applications in medical technology and diagnostic instrumentation. By novel use of the DRIE fabrication technology we have developed side-opened out-of-plane silicon microneedles intended for use in transdermal drug delivery applications. The side opening reduces clogging probability during penetration into the skin and increases the up-take area of the liquid in the tissue. These microneedles offer about 200µm deep and pain-free skin penetration. We have been able to combine the microneedle chip with an electrically and heat controlled liquid actuator device where expandable microspheres are used to push doses of drug liquids into the skin. The entire unit is made of low cost materials in the form of a square one cm-sized patch. Finally, the design, fabrication and evaluation of an integrated miniaturized Quartz Crystal Microbalance (QCM) based "electronic nose" microsystem for detection of narcotics is described. The work integrates a novel environment-to-chip sample interface with the sensor element. The choice of multifunctional materials and the geometric features of a four-component microsystem allow a functional integration of a QCM crystal, electrical contacts, fluidic contacts and a sample interface in a single system with minimal assembly effort, a potential for low-cost manufacturing, and a few orders of magnitude reduced in system size (12*12*4 mm 3) and weight compared to commercially available instruments. The sensor chip was successfully used it for the detection of 200 ng of narcotics sample.

  18. Review of Automated Design and Optimization of MEMS

    DEFF Research Database (Denmark)

    Achiche, Sofiane; Fan, Zhun; Bolognini, Francesca

    2007-01-01

    In recent years MEMS saw a very rapid development. Although many advances have been reached, due to the multiphysics nature of MEMS, their design is still a difficult task carried on mainly by hand calculation. In order to help to overtake such difficulties, attempts to automate MEMS design were...... carried out. This paper presents a review of these techniques. The design task of MEMS is usually divided into four main stages: System Level, Device Level, Physical Level and the Process Level. The state of the art o automated MEMS design in each of these levels is investigated....

  19. A Widely-Accessible Distributed MEMS Processing Environment. The MEMS Exchange Program

    Science.gov (United States)

    2012-10-29

    optic Phase-only Spatial Light Modulator”  “Micro-Mechanical Capacitive Inductive Sensor for Wireless Detection of Relative or Absolute Pressure...Sigma Conversion of Variable Electrical Capacitance ”  “Phased Array Antenna using MEMS Devices on Low-Temperature Co-Fired Ceramic (LTCC) Substrates...MEMS safe and arm fuse (Charlie Robinson); and the micro-g accelerometer project at Spawar (Richard Waters), as well as many others. In addition

  20. Characterization of piezoelectric polymer composites for MEMS ...

    Indian Academy of Sciences (India)

    Home; Journals; Bulletin of Materials Science; Volume 35; Issue 4 ... Keywords. Piezocomposites; MEMS; finite element analysis. ... It is intended to determine the material properties both analytically and by simulation using computer simulation ANSYS software which implements finite element method (FEM). Although the ...

  1. On the Stiction of MEMS Materials

    DEFF Research Database (Denmark)

    Zhuang, Yanxin; Menon, Aric Kumaran

    2005-01-01

    Stiction is a serious problem in microelectromechanical systems (MEMS) due to their large surface area-to-volume ratio. Stiction is closely related to surface forces, which greatly depend on the materials used, surface topography and surface treatment process. In this paper, we investigate surfac...

  2. High performance MEMS micro-gyroscope

    Science.gov (United States)

    Bae, S. Y.; Hayworth, K. J.; Yee, K. Y.; Shcheglov, K.; Challoner, A. D.; Wiberg, D. V.

    2002-01-01

    This paper reports on JPL's on-going research into MEMS gyroscopes. This paper will describe the gyroscope's fabrication-methods, a new 8-electrode layout developed to improve performance, and performance statistics of a batch of six gyroscopes recently rate tested.

  3. Evolving MEMS Resonator Designs for Fabrication

    Science.gov (United States)

    Hornby, Gregory S.; Kraus, William F.; Lohn, Jason D.

    2008-01-01

    Because of their small size and high reliability, microelectromechanical (MEMS) devices have the potential to revolution many areas of engineering. As with conventionally-sized engineering design, there is likely to be a demand for the automated design of MEMS devices. This paper describes our current status as we progress toward our ultimate goal of using an evolutionary algorithm and a generative representation to produce designs of a MEMS device and successfully demonstrate its transfer to an actual chip. To produce designs that are likely to transfer to reality, we present two ways to modify evaluation of designs. The first is to add location noise, differences between the actual dimensions of the design and the design blueprint, which is a technique we have used for our work in evolving antennas and robots. The second method is to add prestress to model the warping that occurs during the extreme heat of fabrication. In future we expect to fabricate and test some MEMS resonators that are evolved in this way.

  4. Review on the Modeling of Electrostatic MEMS

    Science.gov (United States)

    Chuang, Wan-Chun; Lee, Hsin-Li; Chang, Pei-Zen; Hu, Yuh-Chung

    2010-01-01

    Electrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduces the physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices. PMID:22219707

  5. Fractal Structures For Mems Variable Capacitors

    KAUST Repository

    Elshurafa, Amro M.

    2014-08-28

    In accordance with the present disclosure, one embodiment of a fractal variable capacitor comprises a capacitor body in a microelectromechanical system (MEMS) structure, wherein the capacitor body has an upper first metal plate with a fractal shape separated by a vertical distance from a lower first metal plate with a complementary fractal shape; and a substrate above which the capacitor body is suspended.

  6. Bullet Design of MEMS Cantilever - Hand Calculation

    Directory of Open Access Journals (Sweden)

    Abhijeet V. KSHIRSAGAR

    2008-04-01

    Full Text Available The present article describes the basic hand calculations for design of MEMS cantilever for beginners. The MATLAB software code was written to analysis the all formulae. Further the article gives insight of important parameters, its dependence and consideration for a good design.

  7. A novel demodulation method in MEMS gyroscope

    Science.gov (United States)

    Sung, Woon-Tahk; Lee, Jang Gyu; Kang, Taesam

    2005-12-01

    This paper presents a novel approach for demodulation method of signal processing circuit in MEMS gyroscope. Since the MEMS gyroscope utilizes Coriolis acceleration that produces a modulated signal of the input angular velocity and driving signal, in order to measure the original angular rate, the demodulation process is essentially needed. The conventional AM demodulation process in MEMS gyroscope is sensitive to the phase difference between the output signal and the modulation reference signal. Moreover, the output is easily affected by nonlinear and noisy properties of a multiplying circuit. Proposed method eliminates the phase tuning of the demodulation stage and the multiplying process of the signal processing circuit that are likely to be major error factors of signal processing circuit but are essential parts of the conventional demodulation process in MEMS gyroscope. The proposed method utilized the envelope detection scheme of AM demodulation in communication system and modified it to apply to the electromechanical system of gyroscope. Experiments were accomplished to verify the performances. From the results, the proposed method shows a satisfactory performance without a multiplying component and tuning effort of the phase in signal process circuit.

  8. From MEMS to NEMS : Scaling Cantilever Sensors

    NARCIS (Netherlands)

    Yang, C.K.

    2012-01-01

    This thesis studies the effects of scaling on the characterisation and readout of micro-electro mechanical systems (MEMS) to nano-electro mechanical systems (NEMS). In particular it focuses on cantilever, which is a basic device building block and an important transducer in many sensing

  9. Markets and applications for MEMS inertial sensors

    Science.gov (United States)

    Dixon, Richard H.; Bouchaud, Jérémie

    2006-01-01

    The ability to meet demanding specifications and stringent price points continues to drive market insertion for MEMS inertial sensors in cost-sensitive automotive applications and more recently, consumer markets. This paper examines major markets and drivers for gyroscopes and accelerometers, which will grow from a total of 835 million in 2004 to almost 1350 in 2009, a CAGR of over 10%.

  10. Novel RF-MEMS capacitive switching structures

    NARCIS (Netherlands)

    Rottenberg, X.; Jansen, Henricus V.; Fiorini, P.; De Raedt, W.; Tilmans, H.A.C.

    2002-01-01

    This paper reports on novel RF-MEMS capacitive switching devices implementing an electrically floating metal layer covering the dielectric to ensure intimate contact with the bridge in the down state. This results in an optimal switch down capacitance and allows optimisation of the down/up

  11. Characterization of dielectric charging in RF MEMS

    NARCIS (Netherlands)

    Herfst, R.W.; Huizing, H.G.A.; Steeneken, P.G.; Schmitz, Jurriaan

    Capacitive RF MEMS switches show great promise for use in wireless communication devices such as mobile phones, but the successful application of these switches is hindered by the reliability of the devices: charge injection in the dielectric layer (SiN) can cause irreversible stiction of the moving

  12. RF MEMS Switches for Mobile Communication

    NARCIS (Netherlands)

    Steeneken, Peter; Herfst, R.W.; Suy, Hilco; Goossens, Martijn; van Beek, Joost; Bielen, Jeroen; Stulemeijer, Jiri; Schmitz, Jurriaan

    2008-01-01

    Switched capacitors based on radio frequency microelectromechanical systems (RF MEMS) can enable a breakthrough in radio technology. Their switching principle is based on the mechanical movement of the plates of a parallel plate capacitor using the electrostatic force. The resulting difference in

  13. Sandia Agile MEMS Prototyping, Layout Tools, Education and Services Program

    Energy Technology Data Exchange (ETDEWEB)

    Schriner, H.; Davies, B.; Sniegowski, J.; Rodgers, M.S.; Allen, J.; Shepard, C.

    1998-05-01

    Research and development in the design and manufacture of Microelectromechanical Systems (MEMS) is growing at an enormous rate. Advances in MEMS design tools and fabrication processes at Sandia National Laboratories` Microelectronics Development Laboratory (MDL) have broadened the scope of MEMS applications that can be designed and manufactured for both military and commercial use. As improvements in micromachining fabrication technologies continue to be made, MEMS designs can become more complex, thus opening the door to an even broader set of MEMS applications. In an effort to further research and development in MEMS design, fabrication, and application, Sandia National Laboratories has launched the Sandia Agile MEMS Prototyping, Layout Tools, Education and Services Program or SAMPLES program. The SAMPLES program offers potential partners interested in MEMS the opportunity to prototype an idea and produce hardware that can be used to sell a concept. The SAMPLES program provides education and training on Sandia`s design tools, analysis tools and fabrication process. New designers can participate in the SAMPLES program and design MEMS devices using Sandia`s design and analysis tools. As part of the SAMPLES program, participants` designs are fabricated using Sandia`s 4 level polycrystalline silicon surface micromachine technology fabrication process known as SUMMiT (Sandia Ultra-planar, Multi-level MEMS Technology). Furthermore, SAMPLES participants can also opt to obtain state of the art, post-fabrication services provided at Sandia such as release, packaging, reliability characterization, and failure analysis. This paper discusses the components of the SAMPLES program.

  14. 78 FR 16531 - Certain Microelectromechanical Systems (“MEMS Devices”) and Products Containing Same; Notice of...

    Science.gov (United States)

    2013-03-15

    ... COMMISSION Certain Microelectromechanical Systems (``MEMS Devices'') and Products Containing Same; Notice of... Commission has received a complaint entitled Certain Microelectromechanical Systems (``MEMS Devices'') and... microelectromechanical systems (``MEMS devices'') and products containing same. The complaint names as respondents Inven...

  15. 78 FR 22293 - Certain Microelectromechanical Systems (“MEMS Devices”) and Products Containing Same; Institution...

    Science.gov (United States)

    2013-04-15

    ... COMMISSION Certain Microelectromechanical Systems (``MEMS Devices'') and Products Containing Same... United States after importation of certain microelectromechanical systems (``MEMS Devices'') and products... after importation of certain microelectromechanical systems (``MEMS Devices'') and products containing...

  16. Construction and Initial Validation of the Multiracial Experiences Measure (MEM)

    Science.gov (United States)

    Yoo, Hyung Chol; Jackson, Kelly; Guevarra, Rudy P.; Miller, Matthew J.; Harrington, Blair

    2015-01-01

    This article describes the development and validation of the Multiracial Experiences Measure (MEM): a new measure that assesses uniquely racialized risks and resiliencies experienced by individuals of mixed racial heritage. Across two studies, there was evidence for the validation of the 25-item MEM with 5 subscales including Shifting Expressions, Perceived Racial Ambiguity, Creating Third Space, Multicultural Engagement, and Multiracial Discrimination. The 5-subscale structure of the MEM was supported by a combination of exploratory and confirmatory factor analyses. Evidence of criterion-related validity was partially supported with MEM subscales correlating with measures of racial diversity in one’s social network, color-blind racial attitude, psychological distress, and identity conflict. Evidence of discriminant validity was supported with MEM subscales not correlating with impression management. Implications for future research and suggestions for utilization of the MEM in clinical practice with multiracial adults are discussed. PMID:26460977

  17. Advantages of PZT thick film for MEMS sensors

    DEFF Research Database (Denmark)

    Hindrichsen, Christian Carstensen; Lou-Moller, R.; Hansen, K.

    2010-01-01

    For all MEMS devices a high coupling between the mechanical and electrical domain is desired. Figures of merit describing the coupling are important for comparing different piezoelectric materials. The existing figures of merit are discussed and a new figure of merit is introduced for a fair...... comparison of piezoelectric thin and thick films based MEMS devices, as cantilevers, beams, bridges and membranes. Simple analytical modeling is used to define the new figure of merit. The relevant figure of merits is compared for the piezoelectric material of interest for MEMS applications: ZnO, AIN, PZT...... thin film and PZT thick film. It is shown that MEMS sensors with the PZT thick film TF2100 from InSensor A/S have potential for significant higher voltage sensitivities compared to PZT thin film base MEMS sensors when the total thickness of the MEMS cantilever, beam, bridge or membrane is high...

  18. Construction and initial validation of the Multiracial Experiences Measure (MEM).

    Science.gov (United States)

    Yoo, Hyung Chol; Jackson, Kelly F; Guevarra, Rudy P; Miller, Matthew J; Harrington, Blair

    2016-03-01

    This article describes the development and validation of the Multiracial Experiences Measure (MEM): a new measure that assesses uniquely racialized risks and resiliencies experienced by individuals of mixed racial heritage. Across 2 studies, there was evidence for the validation of the 25-item MEM with 5 subscales including Shifting Expressions, Perceived Racial Ambiguity, Creating Third Space, Multicultural Engagement, and Multiracial Discrimination. The 5-subscale structure of the MEM was supported by a combination of exploratory and confirmatory factor analyses. Evidence of criterion-related validity was partially supported with MEM subscales correlating with measures of racial diversity in one's social network, color-blind racial attitude, psychological distress, and identity conflict. Evidence of discriminant validity was supported with MEM subscales not correlating with impression management. Implications for future research and suggestions for utilization of the MEM in clinical practice with multiracial adults are discussed. (c) 2016 APA, all rights reserved).

  19. Application of RPF in MEMS gyro random drift filtering

    Science.gov (United States)

    Guowei, GAO; Yan, XIE

    2017-08-01

    With the development of micro-mechanical inertial technology, how to suppress the MEMS gyro’s random drift increasingly become a hot topic. In order to filter a certain type of MEMS gyro’s random drift, this paper introduces the regularized particle filter algorithm. The derivation of the algorithm and its application in MEMS gyro’s filtering process are described in detail in this paper: First, acquiring MEMS gyro’s static drift data and conducting data pre-treatment; then establishing the AR model by using time series analysis method, and transforming it into the corresponding state space model; finally, executing the estimation and compensation for MEMS gyro’s random drift with regular particle filter algorithm, and comparing it with other common methods in engineering. Tests and simulation results show that the regularized particle filter algorithm could achieve a good effect on the suppression of MEMS gyro’s random drift, it has a higher practical application value.

  20. Image Registration for Stability Testing of MEMS

    Science.gov (United States)

    Memarsadeghi, Nargess; LeMoigne, Jacqueline; Blake, Peter N.; Morey, Peter A.; Landsman, Wayne B.; Chambers, Victor J.; Moseley, Samuel H.

    2011-01-01

    Image registration, or alignment of two or more images covering the same scenes or objects, is of great interest in many disciplines such as remote sensing, medical imaging. astronomy, and computer vision. In this paper, we introduce a new application of image registration algorithms. We demonstrate how through a wavelet based image registration algorithm, engineers can evaluate stability of Micro-Electro-Mechanical Systems (MEMS). In particular, we applied image registration algorithms to assess alignment stability of the MicroShutters Subsystem (MSS) of the Near Infrared Spectrograph (NIRSpec) instrument of the James Webb Space Telescope (JWST). This work introduces a new methodology for evaluating stability of MEMS devices to engineers as well as a new application of image registration algorithms to computer scientists.

  1. MEMS Gyroscopes Based on Acoustic Sagnac Effect

    Directory of Open Access Journals (Sweden)

    Yuanyuan Yu

    2016-12-01

    Full Text Available This paper reports on the design, fabrication and preliminary test results of a novel microelectromechanical systems (MEMS device—the acoustic gyroscope. The unique operating mechanism is based on the “acoustic version” of the Sagnac effect in fiber-optic gyros. The device measures the phase difference between two sound waves traveling in opposite directions, and correlates the signal to the angular velocity of the hosting frame. As sound travels significantly slower than light and develops a larger phase change within the same path length, the acoustic gyro can potentially outperform fiber-optic gyros in sensitivity and form factor. It also promises superior stability compared to vibratory MEMS gyros as the design contains no moving parts and is largely insensitive to mechanical stress or temperature. We have carried out systematic simulations and experiments, and developed a series of processes and design rules to implement the device.

  2. MEMS & microsystems design, manufacture, and nanoscale engineering

    CERN Document Server

    Hsu, Tai-Ran

    2008-01-01

    A bestselling MEMS text...now better than ever. An engineering design approach to Microelectromechanical Systems, MEMS and Microsystems remains the only available text to cover both the electrical and the mechanical aspects of the technology. In the five years since the publication of the first edition, there have been significant changes in the science and technology of miniaturization, including microsystems technology and nanotechnology. In response to the increasing needs of engineers to acquire basic knowledge and experience in these areas, this popular text has been carefully updated, including an entirely new section on the introduction of nanoscale engineering. Following a brief introduction to the history and evolution of nanotechnology, the author covers the fundamentals in the engineering design of nanostructures, including fabrication techniques for producing nanoproducts, engineering design principles in molecular dynamics, and fluid flows and heat transmission in nanoscale substances.

  3. Active mems microbeam device for gas detection

    KAUST Repository

    Bouchaala, Adam M.

    2017-10-05

    Sensors and active switches for applications in gas detection and other fields are described. The devices are based on the softening and hardening nonlinear response behaviors of microelectromechanical systems (MEMS) clamped-clamped microbeams. In that context, embodiments of gas-triggered MEMS microbeam sensors and switches are described. The microbeam devices can be coated with a Metal-Organic Framework to achieve high sensitivity. For gas sensing, an amplitude-based tracking algorithm can be used to quantify an amount of gas captured by the devices according to frequency shift. Noise analysis is also conducted according to the embodiments, which shows that the microbeam devices have high stability against thermal noise. The microbeam devices are also suitable for the generation of binary sensing information for alarming, for example.

  4. Cell Culture on MEMS Platforms: A Review

    Science.gov (United States)

    Ni, Ming; Tong, Wen Hao; Choudhury, Deepak; Rahim, Nur Aida Abdul; Iliescu, Ciprian; Yu, Hanry

    2009-01-01

    Microfabricated systems provide an excellent platform for the culture of cells, and are an extremely useful tool for the investigation of cellular responses to various stimuli. Advantages offered over traditional methods include cost-effectiveness, controllability, low volume, high resolution, and sensitivity. Both biocompatible and bio-incompatible materials have been developed for use in these applications. Biocompatible materials such as PMMA or PLGA can be used directly for cell culture. However, for bio-incompatible materials such as silicon or PDMS, additional steps need to be taken to render these materials more suitable for cell adhesion and maintenance. This review describes multiple surface modification strategies to improve the biocompatibility of MEMS materials. Basic concepts of cell-biomaterial interactions, such as protein adsorption and cell adhesion are covered. Finally, the applications of these MEMS materials in Tissue Engineering are presented. PMID:20054478

  5. MEMS Packaging - Current Issues and Approaches

    Energy Technology Data Exchange (ETDEWEB)

    DRESSENDORFER,PAUL V.; PETERSON,DAVID W.; REBER,CATHLEEN ANN

    2000-01-19

    The assembly and packaging of MEMS (Microelectromechanical Systems) devices raise a number of issues over and above those normally associated with the assembly of standard microelectronic circuits. MEMS components include a variety of sensors, microengines, optical components, and other devices. They often have exposed mechanical structures which during assembly require particulate control, space in the package, non-contact handling procedures, low-stress die attach, precision die placement, unique process schedules, hermetic sealing in controlled environments (including vacuum), and other special constraints. These constraints force changes in the techniques used to separate die on a wafer, in the types of packages which can be used in the assembly processes and materials, and in the sealing environment and process. This paper discusses a number of these issues and provides information on approaches being taken or proposed to address them.

  6. Thermoelastic dissipation in MEMS/NEMS flexural mode resonators.

    Science.gov (United States)

    Yan, Jize; Seshia, Ashwin A

    2009-02-01

    Understanding the energy dissipation mechanisms in single-crystal silicon MEMS/NEMS resonators are particularly important to maximizing an important figure of merit relevant for miniature sensor and signal processing applications: the Quality factor (Q) of resonance. This paper discusses thermoelastic dissipation (TED) as the dominant internal-friction mechanism in flexural mode MEMS/NEMS resonators. Criteria for optimizing the geometrical design of flexural mode MEMS/NEMS resonators are theoretically established with a view towards minimizing the TED for single-crystal silicon MEMS/NEMS flexural mode resonators.

  7. Learning strategies in matching to sample: if-then and configural learning by pigeons.

    Science.gov (United States)

    Katz, Jeffrey S; Bodily, Kent D; Wright, Anthony A

    2008-02-01

    Pigeons learned a matching-to-sample task with a split training-set design in which half of the stimulus displays were untrained and tested following acquisition. Transfer to the untrained displays along with no novel-stimulus transfer indicated that these pigeons learned the task (partially) via if-then rules. Comparisons to other performance measures indicated that they also partially learned the task via configural learning (learning the gestalt of the whole stimulus display). Differences in the FR-sample requirement (1 vs. 20) had no systematic effect on the type of learning or level of learning obtained. Differences from a previous study [Wright, A.A., 1997. Concept learning and learning strategies. Psychol. Sci. 8, 119-123] are discussed, including the effect of displaying the stimuli vertically (traditional display orientation) or horizontally from the floor.

  8. Image Registration for Stability Testing of MEMS

    OpenAIRE

    Memarsadeghi, Nargess; Moigne, Jacqueline Le; Blake, Peter N.; Morey, Peter A.; Landsman, Wayne B.; Chambers, Victor J.; Moseley, Samuel H.

    2013-01-01

    Image registration, or alignment of two or more images covering the same scenes or objects, is of great interest in many disciplines such as remote sensing, medical imaging, astronomy, and computer vision. In this paper, we introduce a new application of image registration algorithms. We demonstrate how through a wavelet based image registration algorithm, engineers can evaluate stability of Micro-Electro-Mechanical Systems (MEMS). In particular, we applied image registration algorithms to as...

  9. Fractal Structures For Fixed Mems Capacitors

    KAUST Repository

    Elshurafa, Amro M.

    2014-08-28

    An embodiment of a fractal fixed capacitor comprises a capacitor body in a microelectromechanical system (MEMS) structure. The capacitor body has a first plate with a fractal shape separated by a horizontal distance from a second plate with a fractal shape. The first plate and the second plate are within the same plane. Such a fractal fixed capacitor further comprises a substrate above which the capacitor body is positioned.

  10. MEMS-Based Waste Vibrational Energy Harvesters

    Science.gov (United States)

    2013-06-01

    low spring constant objective to be achieved. A piezoelectric cantilever beam that is very long and very thin would produce the maximum voltage...California, Berkeley, 2002. [11] A. Kasyap, “Development of MEMS-based piezoelectric cantilever arrays for vibrational energy harvesting,” Gainesville, FL...maximum 200 words) The piezoelectric effect is a phenomenon where strain on a piezoelectric crystal structure causes potential difference at its

  11. Thermoelectrical Generator for a MEMS-Fuze

    OpenAIRE

    A. K. Efremov; K. V. Vlasov

    2015-01-01

    The structure of modern fuzes includes micro-electromechanical systems (MEMS), which have such advanced devices as micro-accelerometers and micro-switches, being triggered at a specified level of setback. Independent power source (PS), as an inherent part of the MEMSfuze, charges an energy storage unit during the shot and triggers the fuze firing circuit when the shell encounters the target. Operating level of the control signal should be achieved within the time of remote arming, determined ...

  12. A Surface Micromachined CMOS MEMS Humidity Sensor

    OpenAIRE

    Jian-Qiu Huang; Fei Li; Min Zhao; Kai Wang

    2015-01-01

    This paper reports a CMOS MEMS (complementary metal oxide semiconductor micro electromechanical system) piezoresistive humidity sensor fabricated by a surface micromachining process. Both pre-CMOS and post-CMOS technologies were used to fabricate the piezoresistive humidity sensor. Compared with a bulk micromachined humidity sensor, the machining precision and the sizes of the surface micromachined humidity sensor were both improved. The package and test systems of the sensor were designed. A...

  13. Movable MEMS Devices on Flexible Silicon

    KAUST Repository

    Ahmed, Sally

    2013-05-05

    Flexible electronics have gained great attention recently. Applications such as flexible displays, artificial skin and health monitoring devices are a few examples of this technology. Looking closely at the components of these devices, although MEMS actuators and sensors can play critical role to extend the application areas of flexible electronics, fabricating movable MEMS devices on flexible substrates is highly challenging. Therefore, this thesis reports a process for fabricating free standing and movable MEMS devices on flexible silicon substrates; MEMS flexure thermal actuators have been fabricated to illustrate the viability of the process. Flexure thermal actuators consist of two arms: a thin hot arm and a wide cold arm separated by a small air gap; the arms are anchored to the substrate from one end and connected to each other from the other end. The actuator design has been modified by adding etch holes in the anchors to suit the process of releasing a thin layer of silicon from the bulk silicon substrate. Selecting materials that are compatible with the release process was challenging. Moreover, difficulties were faced in the fabrication process development; for example, the structural layer of the devices was partially etched during silicon release although it was protected by aluminum oxide which is not attacked by the releasing gas . Furthermore, the thin arm of the thermal actuator was thinned during the fabrication process but optimizing the patterning and etching steps of the structural layer successfully solved this problem. Simulation was carried out to compare the performance of the original and the modified designs for the thermal actuators and to study stress and temperature distribution across a device. A fabricated thermal actuator with a 250 μm long hot arm and a 225 μm long cold arm separated by a 3 μm gap produced a deflection of 3 μm before silicon release, however, the fabrication process must be optimized to obtain fully functioning

  14. Stroboscopic Imaging Interferometer for MEMS Performance Measurement

    Science.gov (United States)

    2007-07-15

    Figure 2 except the single 134 x 30 ptm polysilicon beam is replaced Mode I MlodC 2 77,334 Ilz 217,576 1Iz MIode 3 Mlode 4 485,3112 1Iz 772,996 IlIz...Mode 5 Mode 6 1,352.125 Ilz 1,446,484 lIz Figure 5. COMSOL 3-D Finite Element Modeled results of the MEMS cantilevered test structure. Eigenfrequencies

  15. Ultra-compact MEMS FTIR spectrometer

    Science.gov (United States)

    Sabry, Yasser M.; Hassan, Khaled; Anwar, Momen; Alharon, Mohamed H.; Medhat, Mostafa; Adib, George A.; Dumont, Rich; Saadany, Bassam; Khalil, Diaa

    2017-05-01

    Portable and handheld spectrometers are being developed and commercialized in the late few years leveraging the rapidly-progressing technology and triggering new markets in the field of on-site spectroscopic analysis. Although handheld devices were commercialized for the near-infrared spectroscopy (NIRS), their size and cost stand as an obstacle against the deployment of the spectrometer as spectral sensing components needed for the smart phone industry and the IoT applications. In this work we report a chip-sized microelectromechanical system (MEMS)-based FTIR spectrometer. The core optical engine of the solution is built using a passive-alignment integration technique for a selfaligned MEMS chip; self-aligned microoptics and a single detector in a tiny package sized about 1 cm3. The MEMS chip is a monolithic, high-throughput scanning Michelson interferometer fabricated using deep reactive ion etching technology of silicon-on-insulator substrate. The micro-optical part is used for conditioning the input/output light to/from the MEMS and for further light direction to the detector. Thanks to the all-reflective design of the conditioning microoptics, the performance is free of chromatic aberration. Complemented by the excellent transmission properties of the silicon in the infrared region, the integrated solution allows very wide spectral range of operation. The reported sensor's spectral resolution is about 33 cm-1 and working in the range of 1270 nm to 2700 nm; upper limited by the extended InGaAs detector. The presented solution provides a low cost, low power, tiny size, wide wavelength range NIR spectral sensor that can be manufactured with extremely high volumes. All these features promise the compatibility of this technology with the forthcoming demand of smart portable and IoT devices.

  16. Cell Metabolism Monitoring with MEMS Sensor

    Science.gov (United States)

    Nakabeppu, Osamu; Sakayori, Junichi

    Cells and living tissue slightly but always generate metabolic heat as long as they are alive. Thus, biological activity can be measured through the observation of metabolic heat, which has been developed as “bio-calorimetry”. On the other hand, further improvements in thermal sensing ability can be expected with use of the MEMS (Micro Electro Mechanical System) technology. The purpose of this study is to develop the monitoring technique of the metabolic heat of cells in as small number as possible with the MEMS technology. If the monitoring technique of metabolism of a few cells or even a single cell is made available, it plays very important rolls in bio- and medical- engineering, pharmaceutical sciences, and so on. In this study, a bio-calorimeter with a MEMS thermopile sensor was made, and its performance and metabolism monitoring of Yeast were tested. The thermopile sensor consisted of 350 thin film thermocouples of Cr and Ni strips of 20 μm width on a 150 μm thick glass plate. The thermopile sensor composed a calorimetric cell as a bottom plate with thick aluminum frame. The calorimetric cell was placed in a triple thermostatic chamber which employs a proportional control with a Peltier device and PID control with heater. The calorimeter showed a sensitivity of 0.62 V/W under the condition of including culture solution, time constant of the calorimetric cell of 90 sec, and a noise equivalent power of 60 nW, which corresponds to metabolic heat of 3 × 103 cells of Yeast. In the growth experiments of Yeast, growth thermograms for 105˜107 cells can be measured with reasonable generation times. It was demonstrated that the detectable number of Yeast cells of the MEMS calorimeter is much smaller than that for the traditional bio-calorimeter.

  17. Implicit sequence learning despite multitasking: the role of across-task predictability.

    Science.gov (United States)

    Röttger, Eva; Haider, Hilde; Zhao, Fang; Gaschler, Robert

    2017-09-26

    One often replicated finding is that implicit sequence learning is hampered in dual-task situations. Thus, one crucial question has been whether implicit learning processes require attentional resources. Meanwhile, focusing exclusively on limited attentional resources might be considered as too unspecific. Overall, the focus lies now rather on the possibility that the impairment is due to interference coming along with (a) task integration (e.g., Schmidtke and Heuer in Psychol Res 60(1-2):53-71, 1997)-or with (b) parallel response selection (Schumacher and Schwarb in J Exp Psychol Gen 138(2):270-290, 2009). Yet, other explanations have also been put forward-and there is still no agreement. Our goal here is to contribute to this debate by testing several constraints that have been suggested in the literature within one single paradigm, originating by Schumacher and Schwarb (J Exp Psychol Gen 138(2):270-290, 2009). Therefore, we paired the same visual-manual serial reaction time task (SRTT; Nissen and Bullemer in Cogn Psychol 19(1):1-32, 1987) with different auditory-vocal tone-discrimination tasks across seven dual-task conditions. We manipulated (a) its relation to the SRTT and/or (b) the difficulty of response selection. The results suggest that task integration is indeed a crucial factor for implicit sequence learning: since the tone-task is a potential source of noisy patterns of covariation in a complex arrangement of task components, sequence learning is disrupted. In line with Rah, Reber, and Hsiao (Psychon Bull Rev 7(2):309-313, 2000), the usefulness (in terms of sequence learning) of task integration seems to depend on the predictive value of across-task stimulus and/or response events.

  18. Reliability evaluation of a MEMS scanner

    Science.gov (United States)

    Lani, S.; Marozau, Y.; Dadras, M.

    2017-02-01

    Previously, the realization and closed loop control of a MEMS scanner integrating position sensors made with piezoresistive sensors was presented. It consisted of a silicon compliant membrane with integrated position sensors, on which a mirror and a magnet were assembled. This device was mounted on a PCB containing coils for electromagnetic actuation. In this work, the reliability of such system was evaluated through thermal and mechanical analysis. The objective of thermal analysis was to evaluate the lifetime of the MEMS scanner and is consisting of temperature cycling (-40°C to 100°C) and accelerated electrical endurance (100°C with power supplied to all electrical components). The objective of mechanical analysis was to assess the resistance of the system to mechanical stress and is consisting of mechanical shock and vibration. A high speed camera has been used to observe the behavior of the MEMS scanner. The use of shock stopper to improve the mechanical resistance has been evaluated and had demonstrated a resistance increase from 250g to 900g. The minimum shock resistance required for the system is 500g for transportation and 1000g for portative devices.

  19. Design of a novel MEMS gyroscope array.

    Science.gov (United States)

    Wang, Wei; Lv, Xiaoyong; Sun, Feng

    2013-01-28

    This paper reports a novel four degree-of-freedom (DOF) MEMS vibratory gyroscope. A MEMS gyroscope array is then presented using the novel gyroscope unit. In the design of the proposed 4-DOF MEMS vibratory gyroscope, the elements of the drive-mode are set inside the whole gyroscope architecture, and the elements of sense-mode are set around the drive-mode, which thus makes it possible to combine several gyroscope units into a gyroscope array through sense-modes of all the units. The complete 2-DOF vibratory structure is utilized in both the drive-mode and sense-mode of the gyroscope unit, thereby providing the desired bandwidth and inherent robustness. The gyroscope array combines several gyroscope units by using the unique detection mass, which will increase the gain of sense-mode and improve the sensitivity of the system. The simulation results demonstrate that, compared to a single gyroscope unit, the gain of gyroscope array (n = 6) is increased by about 8 dB; a 3 dB bandwidth of 100 Hz in sense-mode and 190 Hz in drive-mode are also provided. The bandwidths of both modes are highly matched with each other, providing a bandwidth of 100 Hz for the entire system, thus illustrating that it could satisfy the requirements in practical applications.

  20. Solid polymer MEMS-based fuel cells

    Science.gov (United States)

    Jankowski, Alan F [Livermore, CA; Morse, Jeffrey D [Pleasant Hill, CA

    2008-04-22

    A micro-electro-mechanical systems (MEMS) based thin-film fuel cells for electrical power applications. The MEMS-based fuel cell may be of a solid oxide type (SOFC), a solid polymer type (SPFC), or a proton exchange membrane type (PEMFC), and each fuel cell basically consists of an anode and a cathode separated by an electrolyte layer. The electrolyte layer can consist of either a solid oxide or solid polymer material, or proton exchange membrane electrolyte materials may be used. Additionally catalyst layers can also separate the electrodes (cathode and anode) from the electrolyte. Gas manifolds are utilized to transport the fuel and oxidant to each cell and provide a path for exhaust gases. The electrical current generated from each cell is drawn away with an interconnect and support structure integrated with the gas manifold. The fuel cells utilize integrated resistive heaters for efficient heating of the materials. By combining MEMS technology with thin-film deposition technology, thin-film fuel cells having microflow channels and full-integrated circuitry can be produced that will lower the operating temperature an will yield an order of magnitude greater power density than the currently known fuel cells.

  1. Heterogeneous MEMS device assembly and integration

    Science.gov (United States)

    Topart, Patrice; Picard, Francis; Ilias, Samir; Alain, Christine; Chevalier, Claude; Fisette, Bruno; Paultre, Jacques E.; Généreux, Francis; Legros, Mathieu; Lepage, Jean-François; Laverdière, Christian; Ngo Phong, Linh; Caron, Jean-Sol; Desroches, Yan

    2014-03-01

    In recent years, smart phone applications have both raised the pressure for cost and time to market reduction, and the need for high performance MEMS devices. This trend has led the MEMS community to develop multi-die packaging of different functionalities or multi-technology (i.e. wafer) approaches to fabricate and assemble devices respectively. This paper reports on the fabrication, assembly and packaging at INO of various MEMS devices using heterogeneous assembly at chip and package-level. First, the performance of a giant (e.g. about 3 mm in diameter), electrostatically actuated beam steering mirror is presented. It can be rotated about two perpendicular axes to steer an optical beam within an angular cone of up to 60° in vector scan mode with an angular resolution of 1 mrad and a response time of 300 ms. To achieve such angular performance relative to mirror size, the microassembly was performed from sub-components fabricated from 4 different wafers. To combine infrared detection with inertial sensing, an electroplated proof mass was flip-chipped onto a 256×1 pixel uncooled bolometric FPA and released using laser ablation. In addition to the microassembly technology, performance results of packaged devices are presented. Finally, to simulate a 3072×3 pixel uncooled detector for cloud and fire imaging in mid and long-wave IR, the staggered assembly of six 512×3 pixel FPAs with a less than 50 micron pixel co-registration is reported.

  2. A capacitive CMOS-MEMS sensor designed by multi-physics simulation for integrated CMOS-MEMS technology

    Science.gov (United States)

    Konishi, Toshifumi; Yamane, Daisuke; Matsushima, Takaaki; Masu, Kazuya; Machida, Katsuyuki; Toshiyoshi, Hiroshi

    2014-01-01

    This paper reports the design and evaluation results of a capacitive CMOS-MEMS sensor that consists of the proposed sensor circuit and a capacitive MEMS device implemented on the circuit. To design a capacitive CMOS-MEMS sensor, a multi-physics simulation of the electromechanical behavior of both the MEMS structure and the sensing LSI was carried out simultaneously. In order to verify the validity of the design, we applied the capacitive CMOS-MEMS sensor to a MEMS accelerometer implemented by the post-CMOS process onto a 0.35-µm CMOS circuit. The experimental results of the CMOS-MEMS accelerometer exhibited good agreement with the simulation results within the input acceleration range between 0.5 and 6 G (1 G = 9.8 m/s2), corresponding to the output voltages between 908.6 and 915.4 mV, respectively. Therefore, we have confirmed that our capacitive CMOS-MEMS sensor and the multi-physics simulation will be beneficial method to realize integrated CMOS-MEMS technology.

  3. Lubricated MEMS: effect of boundary slippage and texturing

    NARCIS (Netherlands)

    Tauviqirrahman, Mohammad

    2013-01-01

    Many types of micro-electro-mechanical-system (MEMS) based products are currently employed in a variety of applications. Recently, there has been an increase in the demand for higher reliability of MEMS which incorporate moving parts for each intended application. This is because the reliability of

  4. RF-MEMS capacitive switches with high reliability

    Science.gov (United States)

    Goldsmith, Charles L.; Auciello, Orlando H.; Carlisle, John A.; Sampath, Suresh; Sumant, Anirudha V.; Carpick, Robert W.; Hwang, James; Mancini, Derrick C.; Gudeman, Chris

    2013-09-03

    A reliable long life RF-MEMS capacitive switch is provided with a dielectric layer comprising a "fast discharge diamond dielectric layer" and enabling rapid switch recovery, dielectric layer charging and discharging that is efficient and effective to enable RF-MEMS switch operation to greater than or equal to 100 billion cycles.

  5. Shutdown Policies for MEMS-Based Storage Devices -- Analytical Models

    NARCIS (Netherlands)

    Khatib, M.G.; Engelen, Johannes Bernardus Charles; Hartel, Pieter H.

    MEMS-based storage devices should be energy ecient for deployment in mobile systems. Since MEMS-based storage devices have a moving me- dia sled, they should be shut down during periods of inactivity. However, shutdown costs energy, limiting the applicability of aggressive shutdown decisions. The

  6. Development and application of high-end aerospace MEMS

    Science.gov (United States)

    Yuan, Weizheng

    2017-12-01

    This paper introduces the design and manufacturing technology of aerospace microelectromechanical systems (MEMS) characterized by high performance, multi-variety, and small batch. Moreover, several kinds of special MEMS devices with high precision, high reliability, and environmental adaptability, as well as their typical applications in the fields of aeronautics and aerospace, are presented.

  7. LTCC phase shifter modules for RF-MEMS-switch integration

    NARCIS (Netherlands)

    Bartnitzek, T.; Muller, E.; Dijk, R. van

    2005-01-01

    The European 1ST project ARHMS is covering a wide field of R&D activities with the final goal: a satellite based car communication system with a fiat electronically steerable roof antenna based on RF-MEMS. The required phase shift for beam steering will be done with MEMS switches and RF networks. An

  8. Buffering Implications for the Design Space of Streaming MEMS Storage

    NARCIS (Netherlands)

    Khatib, M.G.; Abelmann, Leon; Preas, Kathy

    2011-01-01

    Emerging nanotechnology-based systems encounter new non-functional requirements. This work addresses MEMS storage, an emerging technology that promises ultrahigh density and energy-efficient storage devices. We study the buffering requirement of MEMS storage in streaming applications. We show that

  9. Using MEMS Capacitive Switches in Tunable RF Amplifiers

    Directory of Open Access Journals (Sweden)

    Danson John

    2006-01-01

    Full Text Available A MEMS capacitive switch suitable for use in tunable RF amplifiers is described. A MEMS switch is designed, fabricated, and characterized with physical and RF measurements for inclusion in simulations. Using the MEMS switch models, a dual-band low-noise amplifier (LNA operating at GHz and GHz, and a tunable power amplifier (PA at GHz are simulated in m CMOS. MEMS switches allow the LNA to operate with 11 dB of isolation between the two bands while maintaining dB of gain and sub- dB noise figure. MEMS switches are used to implement a variable matching network that allows the PA to realize up to 37% PAE improvement at low input powers.

  10. Using MEMS Capacitive Switches in Tunable RF Amplifiers

    Directory of Open Access Journals (Sweden)

    2006-01-01

    Full Text Available A MEMS capacitive switch suitable for use in tunable RF amplifiers is described. A MEMS switch is designed, fabricated, and characterized with physical and RF measurements for inclusion in simulations. Using the MEMS switch models, a dual-band low-noise amplifier (LNA operating at 2.4 GHz and 5.2 GHz, and a tunable power amplifier (PA at 5.2 GHz are simulated in 0.18 μ m CMOS. MEMS switches allow the LNA to operate with 11 dB of isolation between the two bands while maintaining 11.6 dB of gain and sub- 4.5 dB noise figure. MEMS switches are used to implement a variable matching network that allows the PA to realize up to 37% PAE improvement at low input powers.

  11. Real-time analysis for Stochastic errors of MEMS gyro

    Science.gov (United States)

    Miao, Zhiyong; Shi, Hongyang; Zhang, Yi

    2017-10-01

    Since a good knowledge of MEMS gyro stochastic errors is important and critical to MEMS INS/GPS integration system. Therefore, the stochastic errors of MEMS gyro should be accurately modeled and identified. The Allan variance method is IEEE standard method in the filed of analysis stochastic errors of gyro. This kind of method can fully characterize the random character of stochastic errors. However, it requires a large amount of data to be stored, resulting in large offline computational burden. Moreover, it has a painful procedure of drawing slope lines for estimation. To overcome the barriers, a simple linear state-space model was established for MEMS gyro. Then, a recursive EM algorithm was implemented to estimate the stochastic errors of MEMS gyro in real time. The experimental results of ADIS16405 IMU show that the real-time estimations of proposed approach are well within the error limits of Allan variance method. Moreover, the proposed method effectively avoids the storage of data.

  12. Antenna Miniaturization with MEMS Tunable Capacitors

    DEFF Research Database (Denmark)

    Barrio, Samantha Caporal Del; Morris, Art; Pedersen, Gert Frølund

    2014-01-01

    In today’s mobile device market, there is a strong need for efficient antenna miniaturization. Tunable antennas are a very promising way to reduce antenna volume while enlarging its operating bandwidth. MEMS tunable capacitors are state-ofthe- art in terms of insertion loss...... and their characteristics are used in this investigation. This paper uses field simulations to highlight the trade-offs between the design of the tuner and the design of the antenna, especially the impact of the location of the tuner and the degree of miniaturization. Co-designing the tuner and the antenna is essential...

  13. Integrated optics and MEMS in microsensing

    Science.gov (United States)

    Gorecki, Christophe

    2005-09-01

    Silicon micromachining benefits from the small scale and the facility of integration with electronic circuits and sensors resulting in production of miniaturized and smart microsystems with moving parts. The dimensional scale of MEMS/MOEMS devices is immediately compatible with the size of Integrated Optics, and is appropriate to control or manipulate optical radiations. This technology is suitable to fabricate precision-defined optical components and offers easy alignment procedures of optical parts. This paper examines the contribution of micromachined structures in the specific context of optical microsensors.

  14. Memória social e cidadania

    Directory of Open Access Journals (Sweden)

    Desaulniers Julieta Beatriz Ramos

    1997-01-01

    Full Text Available Pretende-se expor como as investigações que se desenvolvem em torno de uma problemática de pesquisa referente à formação em escolas de ofício católicas e à organização e estrutura do campo religioso no Rio Grande do Sul/ Brasil (séculos XVIII, XIX, XX, tem procurado preservar os diversos suportes da memória social visto que se trata de uma forma de ampliar os "espaços de possibilidades" voltados à construção da cidadania.

  15. Memória social e cidadania

    Directory of Open Access Journals (Sweden)

    Julieta Beatriz Ramos Desaulniers

    Full Text Available Pretende-se expor como as investigações que se desenvolvem em torno de uma problemática de pesquisa referente à formação em escolas de ofício católicas e à organização e estrutura do campo religioso no Rio Grande do Sul/ Brasil (séculos XVIII, XIX, XX, tem procurado preservar os diversos suportes da memória social visto que se trata de uma forma de ampliar os "espaços de possibilidades" voltados à construção da cidadania.

  16. MEMS-Reconfigurable Metamaterials and Antenna Applications

    Directory of Open Access Journals (Sweden)

    Tomislav Debogovic

    2014-01-01

    Full Text Available This paper reviews some of our contributions to reconfigurable metamaterials, where dynamic control is enabled by microelectromechanical systems (MEMS technology. First, we show reconfigurable composite right-/left-handed transmission lines (CRLH-TLs having state of the art phase velocity variation and loss, thereby enabling efficient reconfigurable phase shifters and leaky-wave antennas (LWA. Second, we present very low loss metasurface designs with reconfigurable reflection properties, applicable in reflectarrays and partially reflective surface (PRS antennas. All the presented devices have been fabricated and experimentally validated. They operate in X- and Ku-bands.

  17. MEMS-BASED 3D CONFOCAL SCANNING MICROENDOSCOPE USING MEMS SCANNERS FOR BOTH LATERAL AND AXIAL SCAN.

    Science.gov (United States)

    Liu, Lin; Wang, Erkang; Zhang, Xiaoyang; Liang, Wenxuan; Li, Xingde; Xie, Huikai

    2014-08-15

    A fiber-optic 3D confocal scanning microendoscope employing MEMS scanners for both lateral and axial scan was designed and constructed. The MEMS 3D scan engine achieved a lateral scan range of over ± 26° with a 2D MEMS scanning micromirror and a depth scan of over 400 μm with a 1D MEMS tunable microlens. The lateral resolution and axial resolution of this system were experimentally measured as 1.0 μm and 7.0 μm, respectively. 2D and 3D confocal reflectance images of micro-patterns, micro-particles, onion skins and acute rat brain tissue were obtained by this MEMS-based 3D confocal scanning microendoscope.

  18. Predicting the random drift of MEMS gyroscope based on K-means clustering and OLS RBF Neural Network

    Science.gov (United States)

    Wang, Zhen-yu; Zhang, Li-jie

    2017-10-01

    Measure error of the sensor can be effectively compensated with prediction. Aiming at large random drift error of MEMS(Micro Electro Mechanical System))gyroscope, an improved learning algorithm of Radial Basis Function(RBF) Neural Network(NN) based on K-means clustering and Orthogonal Least-Squares (OLS) is proposed in this paper. The algorithm selects the typical samples as the initial cluster centers of RBF NN firstly, candidates centers with K-means algorithm secondly, and optimizes the candidate centers with OLS algorithm thirdly, which makes the network structure simpler and makes the prediction performance better. Experimental results show that the proposed K-means clustering OLS learning algorithm can predict the random drift of MEMS gyroscope effectively, the prediction error of which is 9.8019e-007°/s and the prediction time of which is 2.4169e-006s

  19. MEMS mass-spring-damper systems using an out-of-plane suspension scheme

    KAUST Repository

    Abdel Aziz, Ahmed Kamal Said

    2014-02-04

    MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) using an out-of-plane (or vertical) suspension scheme, wherein the suspensions are normal to the proof mass, are disclosed. Such out-of-plane suspension scheme helps such MEMS mass-spring-damper systems achieve inertial grade performance. Methods of fabricating out-of-plane suspensions in MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) are also disclosed.

  20. Photonic MEMS for NIR in-situ

    Energy Technology Data Exchange (ETDEWEB)

    Bond, T C; Cole, G D; Goddard, L L; Behymer, E

    2007-07-03

    We report on a novel sensing technique combining photonics and microelectromechanical systems (MEMS) for the detection and monitoring of gas emissions for critical environmental, medical, and industrial applications. We discuss how MEMS-tunable vertical-cavity surface-emitting lasers (VCSELs) can be exploited for in-situ detection and NIR spectroscopy of several gases, such as O{sub 2}, N{sub 2}O, CO{sub x}, CH{sub 4}, HF, HCl, etc., with estimated sensitivities between 0.1 and 20 ppm on footprints {approx}10{sup -3} mm{sup 3}. The VCSELs can be electrostatically tuned with a continuous wavelength shift up to 20 nm, allowing for unambiguous NIR signature determination. Selective concentration analysis in heterogeneous gas compositions is enabled, thus paving the way to an integrated optical platform for multiplexed gas identification by bandgap and device engineering. We will discuss here, in particular, our efforts on the development of a 760 nm AlGaAs based tunable VCSEL for O{sub 2} detection.

  1. Study of self-calibrating MEMS accelerometers

    Directory of Open Access Journals (Sweden)

    Weiping Chen

    2015-04-01

    Full Text Available Micro-electromechanical System(MEMS accelerometers are widely used in a number of inertial navigation systems and vibration detection system thanks to their small size, low cost and low power consumption. In order to improve their performance, the accelerometers have been designed to compensate the zero-bias caused by process variations. A new method of self-calibration sensitivity applies a self-test structure to simulate standard acceleration; depending on the standard and real-time values of the accelerometer’s output and by adjustment of the time division feedback, the scale factor of capacitive accelerometers can be flexibly adjusted to achieve sensitivity in self-calibrating MEMS accelerometers. Moreover, this research also uses the following: a PID feedback structure to improve the stability of the closed-loop system; a correlated double sampling (CDS circuit to attenuate noise, which can eliminate zero drift caused by offset voltage of the pre-amplifier; a time division multiplexing electrostatic force feedback circuit to achieve the operation of a closed-loop micro-accelerometer. The structure can completely avoid electrostatic feedback coupling with a capacitance change detection circuit, which can also improve the bandwidth and stability of the accelerometer. By means of capacitance compensation array the zero-bias performance of accelerometers can be improved. The bias stability of the accelerometer can be reduced from 173mg to 31mg by testing.

  2. Study of self-calibrating MEMS accelerometers

    Science.gov (United States)

    Chen, Weiping; Li, Xiangyu; Liu, Xiaowei; Yin, Liang

    2015-04-01

    Micro-electromechanical System(MEMS) accelerometers are widely used in a number of inertial navigation systems and vibration detection system thanks to their small size, low cost and low power consumption. In order to improve their performance, the accelerometers have been designed to compensate the zero-bias caused by process variations. A new method of self-calibration sensitivity applies a self-test structure to simulate standard acceleration; depending on the standard and real-time values of the accelerometer's output and by adjustment of the time division feedback, the scale factor of capacitive accelerometers can be flexibly adjusted to achieve sensitivity in self-calibrating MEMS accelerometers. Moreover, this research also uses the following: a PID feedback structure to improve the stability of the closed-loop system; a correlated double sampling (CDS) circuit to attenuate noise, which can eliminate zero drift caused by offset voltage of the pre-amplifier; a time division multiplexing electrostatic force feedback circuit to achieve the operation of a closed-loop micro-accelerometer. The structure can completely avoid electrostatic feedback coupling with a capacitance change detection circuit, which can also improve the bandwidth and stability of the accelerometer. By means of capacitance compensation array the zero-bias performance of accelerometers can be improved. The bias stability of the accelerometer can be reduced from 173mg to 31mg by testing.

  3. Applications of MEMS technologies in tissue engineering.

    Science.gov (United States)

    Puleo, Christopher M; Yeh, Hsin-Chih; Wang, Tza-Huei

    2007-12-01

    The success of therapeutic strategies within the fields of regenerative medicine, including tissue engineering, biomaterials engineering, and cell and tissue transplantation science, relies on researchers' understanding of the complex cellular microenvironments that occur within functional tissue. Microfabricated biomedical platforms provide tools for researchers to study cellular response to various stimuli with micro- and nanoscale spatial control. Initial studies utilizing relatively passive means of microenvironmental control have provided the fundamental knowledge required to begin to design microculture platforms that closely mimic these biological systems. In this review, we discuss second-generation cell and tissue culture platforms that utilize active components, borrowed from work in the development of microelectromechanical systems (MEMS). These microsystems offer the unprecedented opportunity to fabricate culture platforms designed to match tissue-specific growth parameters. In addition, the adoption of MEMS components opens up the door for future integration with the burgeoning field of microanalytical systems, providing analytical platforms that retain the sensitivity and resolution required within low-volume, microfluidic culture technologies.

  4. Piezoelectric Zinc Oxide Based MEMS Acoustic Sensor

    Directory of Open Access Journals (Sweden)

    Aarti Arora

    2008-04-01

    Full Text Available An acoustic sensors exhibiting good sensitivity was fabricated using MEMS technology having piezoelectric zinc oxide as a dielectric between two plates of capacitor. Thin film zinc oxide has structural, piezoelectric and optical properties for surface acoustic wave (SAW and bulk acoustic wave (BAW devices. Oxygen effficient films are transparent and insulating having wide applications for sensors and transducers. A rf sputtered piezoelectric ZnO layer transforms the mechanical deflection of a thin etched silicon diaphragm into a piezoelectric charge. For 25-micron thin diaphragm Si was etched in tetramethylammonium hydroxide solution using bulk micromachining. This was followed by deposition of sandwiched structure composed of bottom aluminum electrode, sputtered 3 micron ZnO film and top aluminum electrode. A glass having 1 mm diameter hole was bonded on backside of device to compensate sound pressure in side the cavity. The measured value of central capacitance and dissipation factor of the fabricated MEMS acoustic sensor was found to be 82.4pF and 0.115 respectively, where as the value of ~176 pF was obtained for the rim capacitance with a dissipation factor of 0.138. The response of the acoustic sensors was reproducible for the devices prepared under similar processing conditions under different batches. The acoustic sensor was found to be working from 30Hz to 8KHz with a sensitivity of 139µV/Pa under varying acoustic pressure.

  5. The Development of the Differential MEMS Vector Hydrophone

    Directory of Open Access Journals (Sweden)

    Guojun Zhang

    2017-06-01

    Full Text Available To solve the problem that MEMS vector hydrophones are greatly interfered with by the vibration of the platform and flow noise in applications, this paper describes a differential MEMS vector hydrophone that could simultaneously receive acoustic signals and reject acceleration signals. Theoretical and simulation analyses have been carried out. Lastly, a prototype of the differential MEMS vector hydrophone has been created and tested using a standing wave tube and a vibration platform. The results of the test show that this hydrophone has a high sensitivity, Mv = −185 dB (@ 500 Hz, 0 dB reference 1 V/μPa, which is almost the same as the previous MEMS vector hydrophones, and has a low acceleration sensitivity, Mv = −58 dB (0 dB reference 1 V/g, which has decreased by 17 dB compared with the previous MEMS vector hydrophone. The differential MEMS vector hydrophone basically meets the requirements of acoustic vector detection when it is rigidly fixed to a working platform, which lays the foundation for engineering applications of MEMS vector hydrophones.

  6. The Development of the Differential MEMS Vector Hydrophone.

    Science.gov (United States)

    Zhang, Guojun; Liu, Mengran; Shen, Nixin; Wang, Xubo; Zhang, Wendong

    2017-06-08

    To solve the problem that MEMS vector hydrophones are greatly interfered with by the vibration of the platform and flow noise in applications, this paper describes a differential MEMS vector hydrophone that could simultaneously receive acoustic signals and reject acceleration signals. Theoretical and simulation analyses have been carried out. Lastly, a prototype of the differential MEMS vector hydrophone has been created and tested using a standing wave tube and a vibration platform. The results of the test show that this hydrophone has a high sensitivity, Mv = -185 dB (@ 500 Hz, 0 dB reference 1 V/μPa), which is almost the same as the previous MEMS vector hydrophones, and has a low acceleration sensitivity, Mv = -58 dB (0 dB reference 1 V/g), which has decreased by 17 dB compared with the previous MEMS vector hydrophone. The differential MEMS vector hydrophone basically meets the requirements of acoustic vector detection when it is rigidly fixed to a working platform, which lays the foundation for engineering applications of MEMS vector hydrophones.

  7. Shifting the Inertial Navigation Paradigm with MEMS Technology

    Science.gov (United States)

    Crain, Timothy; Brady, Tye; Bishop, Robert H.

    2010-01-01

    Why don t you use MEMS? is one of the most common questions posed to navigation systems engineers designing inertial navigation solutions in the modern era. The question stems from a general understanding that great strides have been made in terrestrial MEMS accelerometers and attitude rate sensors in terms of accuracy, mass, and power. Yet, when compared on a unit-to-unit basis, MEMS devices do not provide comparable performance (accuracy) to navigation grade sensors. This paper will propose a paradigm shift where the comparison in performance is between multiple MEMS devices and a single navigation grade sensor. The concept is that systematically, a sufficient number of MEMS sensors may mathematically provide comparable performance to a single navigation grade device and be competitive in terms power and mass allocations when viewed on a systems level. The implication is that both inertial navigation system design and fault detection, identification, and recovery could benefit from a system of MEMS devices in the same way that swarm sensing has benefited Earth observation and astronomy. A survey of the state of the art in inertial sensor accuracy scaled by mass and power will be provided to show the specific error in MEMS and navigation graded devices, a mathematical comparison of multi-unit to single-unit sensor errors will be developed, and preliminary applications to Constellation vehicles will be explored.

  8. Shifting the Intertial Navigation Paradigm with the MEMS Technology

    Science.gov (United States)

    Crain, Timothy P., II; Bishop, Robert H.; Brady, Tye

    2010-01-01

    "Why don't you use MEMS?" is of the most common questions posed to navigation systems engineers designing inertial navigation solutions in the modern era. The question stems from a general understanding that great strides have been made in terrestrial MEMS accelerometers and attitude rate sensors in terms of accuracy, mass, and power. Yet, when compared on a unit-to-unit basis, MEMS devices do not provide comparable performance (accuracy) to navigation grade sensors in several key metrics. This paper will propose a paradigm shift where the comparison in performance is between multiple MEMS devices and a single navigation grade sensor. The concept is that systematically, a sufficient number of MEMS sensors may mathematically provide comparable performance to a single navigation grade device and be competitive in terms power and mass allocations when viewed on a systems level. The implication is that both inertial navigation system design and fault detection, identification, and recovery could benefit from a system of MEMS devices in the same way that swarm sensing has benefited Earth observation and astronomy. A survey of the state of the art in inertial sensor accuracy scaled by mass and power will be provided to show the scaled error in MEMS and navigation graded devices, a mathematical comparison of multi-unit to single-unit sensor errors will be developed, and preliminary application to an Orion lunar skip atmospheric entry trajectory will be explored.

  9. A MEMS-based, wireless, biometric-like security system

    Science.gov (United States)

    Cross, Joshua D.; Schneiter, John L.; Leiby, Grant A.; McCarter, Steven; Smith, Jeremiah; Budka, Thomas P.

    2010-04-01

    We present a system for secure identification applications that is based upon biometric-like MEMS chips. The MEMS chips have unique frequency signatures resulting from fabrication process variations. The MEMS chips possess something analogous to a "voiceprint". The chips are vacuum encapsulated, rugged, and suitable for low-cost, highvolume mass production. Furthermore, the fabrication process is fully integrated with standard CMOS fabrication methods. One is able to operate the MEMS-based identification system similarly to a conventional RFID system: the reader (essentially a custom network analyzer) detects the power reflected across a frequency spectrum from a MEMS chip in its vicinity. We demonstrate prototype "tags" - MEMS chips placed on a credit card-like substrate - to show how the system could be used in standard identification or authentication applications. We have integrated power scavenging to provide DC bias for the MEMS chips through the use of a 915 MHz source in the reader and a RF-DC conversion circuit on the tag. The system enables a high level of protection against typical RFID hacking attacks. There is no need for signal encryption, so back-end infrastructure is minimal. We believe this system would make a viable low-cost, high-security system for a variety of identification and authentication applications.

  10. Carbon microelectromechanical systems (C-MEMS) based microsupercapacitors

    KAUST Repository

    Agrawal, Richa

    2015-05-18

    The rapid development in miniaturized electronic devices has led to an ever increasing demand for high-performance rechargeable micropower scources. Microsupercapacitors in particular have gained much attention in recent years owing to their ability to provide high pulse power while maintaining long cycle lives. Carbon microelectromechanical systems (C-MEMS) is a powerful approach to fabricate high aspect ratio carbon microelectrode arrays, which has been proved to hold great promise as a platform for energy storage. C-MEMS is a versatile technique to create carbon structures by pyrolyzing a patterned photoresist. Furthermore, different active materials can be loaded onto these microelectrode platforms for further enhancement of the electrochemical performance of the C-MEMS platform. In this article, different techniques and methods in order to enhance C-MEMS based various electrochemical capacitor systems have been discussed, including electrochemical activation of C-MEMS structures for miniaturized supercapacitor applications, integration of carbon nanostructures like carbon nanotubes onto C-MEMS structures and also integration of pseudocapacitive materials such as polypyrrole onto C-MEMS structures. © (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.

  11. Carbon microelectromechanical systems (C-MEMS) based microsupercapacitors

    Science.gov (United States)

    Agrawal, Richa; Beidaghi, Majid; Chen, Wei; Wang, Chunlei

    2015-05-01

    The rapid development in miniaturized electronic devices has led to an ever increasing demand for high-performance rechargeable micropower scources. Microsupercapacitors in particular have gained much attention in recent years owing to their ability to provide high pulse power while maintaining long cycle lives. Carbon microelectromechanical systems (C-MEMS) is a powerful approach to fabricate high aspect ratio carbon microelectrode arrays, which has been proved to hold great promise as a platform for energy storage. C-MEMS is a versatile technique to create carbon structures by pyrolyzing a patterned photoresist. Furthermore, different active materials can be loaded onto these microelectrode platforms for further enhancement of the electrochemical performance of the C-MEMS platform. In this article, different techniques and methods in order to enhance C-MEMS based various electrochemical capacitor systems have been discussed, including electrochemical activation of C-MEMS structures for miniaturized supercapacitor applications, integration of carbon nanostructures like carbon nanotubes onto C-MEMS structures and also integration of pseudocapacitive materials such as polypyrrole onto C-MEMS structures.

  12. Mathematical analysis of partial differential equations modeling electrostatic MEMS

    CERN Document Server

    Esposito, Pierpaolo; Guo, Yujin

    2010-01-01

    Micro- and nanoelectromechanical systems (MEMS and NEMS), which combine electronics with miniature-size mechanical devices, are essential components of modern technology. It is the mathematical model describing "electrostatically actuated" MEMS that is addressed in this monograph. Even the simplified models that the authors deal with still lead to very interesting second- and fourth-order nonlinear elliptic equations (in the stationary case) and to nonlinear parabolic equations (in the dynamic case). While nonlinear eigenvalue problems-where the stationary MEMS models fit-are a well-developed

  13. Research of DOA Estimation Based on Single MEMS Vector Hydrophone.

    Science.gov (United States)

    Zhang, Wen Dong; Guan, Ling Gang; Zhang, Guo Jun; Xue, Chen Yang; Zhang, Kai Rui; Wang, Jian Ping

    2009-01-01

    The MEMS vector hydrophone is a novel acoustic sensor with a "four-beam-cilia" structure. Based on the MEMS vector hydrophone with this structure, the paper studies the method of estimated direction of arrival (DOA). According to various research papers, many algorithms can be applied to vector hydrophones. The beam-forming approach and bar graph approach are described in detail. Laboratory tests by means of the a standing-wave tube are performed to validate the theoretical results. Both the theoretical analysis and the results of tests prove that the proposed MEMS vector hydrophone possesses the desired directional function.

  14. System Dynamics and Adaptive Control for MEMS Gyroscope Sensor

    Directory of Open Access Journals (Sweden)

    Juntao Fei

    2010-12-01

    Full Text Available This paper presents an adaptive control approach for Micro-Electro-Mechanical Systems (MEMS z-axis gyroscope sensor. The dynamical model of MEMS gyroscope sensor is derived and adaptive state tracking control for MEMS gyroscope is developed. The proposed adaptive control approaches can estimate the angular velocity and the damping and stiffness coefficients including the coupling terms due to the fabrication imperfection. The stability of the closed-loop systems is established with the proposed adaptive control strategy. Numerical simulation is investigated to verify the effectiveness of the proposed control scheme.

  15. The Sandia MEMS passive shock sensor : FY07 maturation activities.

    Energy Technology Data Exchange (ETDEWEB)

    Houston, Jack E.; Blecke, Jill; Mitchell, John Anthony; Wittwer, Jonathan W.; Crowson, Douglas A.; Clemens, Rebecca C.; Walraven, Jeremy Allen; Epp, David S.; Baker, Michael Sean

    2008-08-01

    This report describes activities conducted in FY07 to mature the MEMS passive shock sensor. The first chapter of the report provides motivation and background on activities that are described in detail in later chapters. The second chapter discusses concepts that are important for integrating the MEMS passive shock sensor into a system. Following these two introductory chapters, the report details modeling and design efforts, packaging, failure analysis and testing and validation. At the end of FY07, the MEMS passive shock sensor was at TRL 4.

  16. MEMS wing technology for a battery-powered ornithopter

    OpenAIRE

    Pornsin-sirirak, T. Nick; Lee, S. W.; Nassef, H.; Grasmeyer, J.; Tai, Y. C.; Ho, C. M.; Keennon, M.

    2000-01-01

    The objective of this project is to develop a battery-powered ornithopter (flapping-wing) Micro Aerial Vehicle (MAV) with MEMS wings. In this paper, we present a novel MEMS-based wing technology that we developed using titanium-alloy metal as wingframe and parylene C as wing membrane. MEMS technology enables systematic research in terms of repeatablility, size control, and weight minimization. We constructed a high quality low-speed wind tunnel with velocity uniformity of 0.5% and speeds from...

  17. Millorar la memòria amb adrenalina

    OpenAIRE

    Portell Cortés, Isabel

    2010-01-01

    Aquesta recerca ha estudiat la influència positiva de l'adrenalina sobre la memòria de reconeixement, en concret per a la identitat i la localització d'un objecte determinat. Aquesta hormona afecta la manera en què el cervell guarda els records. Usant models animals de laboratori, s'ha pogut observar que l'administració d'adrenalina, després de l'entrenament de memòria, allarga la durada del record, en tasques de memòria de reconeixement, fins a deu vegades més que en els animals control....

  18. 3D heterostructures and systems for novel MEMS/NEMS.

    Science.gov (United States)

    Yakovlevich Prinz, Victor; Alexandrovich Seleznev, Vladimir; Victorovich Prinz, Alexander; Vladimirovich Kopylov, Alexander

    2009-06-01

    In this review, we consider the application of solid micro- and nanostructures of various shapes as building blocks for micro-electro-mechanical or nano-electro-mechanical systems (MEMS/NEMS). We provide examples of practical applications of structures created by MEMS/NEMS fabrication. Novel devices are briefly described, such as a high-power electrostatic nanoactuator, a fast-response tubular anemometer for measuring gas and liquid flows, a nanoprinter, a nanosyringe and optical MEMS/NEMS. The prospects are described for achieving NEMS with tunable quantum properties.

  19. 3D heterostructures and systems for novel MEMS/NEMS

    Directory of Open Access Journals (Sweden)

    Victor Yakovlevich Prinz, Vladimir Alexandrovich Seleznev, Alexander Victorovich Prinz and Alexander Vladimirovich Kopylov

    2009-01-01

    Full Text Available In this review, we consider the application of solid micro- and nanostructures of various shapes as building blocks for micro-electro-mechanical or nano-electro-mechanical systems (MEMS/NEMS. We provide examples of practical applications of structures created by MEMS/NEMS fabrication. Novel devices are briefly described, such as a high-power electrostatic nanoactuator, a fast-response tubular anemometer for measuring gas and liquid flows, a nanoprinter, a nanosyringe and optical MEMS/NEMS. The prospects are described for achieving NEMS with tunable quantum properties.

  20. Differential RF MEMS interwoven capacitor immune to residual stress warping

    KAUST Repository

    Elshurafa, Amro M.

    2012-07-27

    A RF MEMS capacitor with an interwoven structure is designed, fabricated in the PolyMUMPS process and tested in an effort to address fabrication challenges usually faced in MEMS processes. The interwoven structure was found to offer several advantages over the typical MEMS parallel-plate design including eliminating the warping caused by residual stress, eliminating the need for etching holes, suppressing stiction, reducing parasitics and providing differential capability. The quality factor of the proposed capacitor was higher than five throughout a 2–10 GHz range and the resonant frequency was in excess of 20 GHz.

  1. MEMS-magnetometrin kapasitiivisen lukuelektroniikan kehittäminen

    OpenAIRE

    Latonen, Teemu

    2011-01-01

    Tässä insinöörityössä suunniteltiin ja valmistettiin MEMS-magnetometrille soveltuva kapasitiivinen lukuelektroniikka. Magnetometrin sisäinen rakenne on esitelty ja pohdittu anturin mahdollisia sovelluskohteita. Lisäksi työssä on esitelty MEMS-tekniikkaa ja sen hyötyjä sekä ongelmia ja perehdytty mekaanisen resonanssin hyödyntämiseen MEMS-komponenteissa. Työssä on esitelty myös magneettikentän voimakkuuden mittauksiin yleisesti käytössä olevia tekniikoita. Insinöörityössä rakennettiin kol...

  2. Superhydrophobic Surface Coatings for Microfluidics and MEMs.

    Energy Technology Data Exchange (ETDEWEB)

    Branson, Eric D.; Singh, Seema [Sandia National Laboratories, Livermore, CA; Houston, Jack E.; van Swol, Frank B.; Brinker, C. Jeffrey

    2006-11-01

    Low solid interfacial energy and fractally rough surface topography confer to Lotus plants superhydrophobic (SH) properties like high contact angles, rolling and bouncing of liquid droplets, and self-cleaning of particle contaminants. This project exploits the porous fractal structure of a novel, synthetic SH surface for aerosol collection, its self-cleaning properties for particle concentration, and its slippery nature 3 to enhance the performance of fluidic and MEMS devices. We propose to understand fundamentally the conditions needed to cause liquid droplets to roll rather than flow/slide on a surface and how this %22rolling transition%22 influences the boundary condition describing fluid flow in a pipe or micro-channel. Rolling of droplets is important for aerosol collection strategies because it allows trapped particles to be concentrated and transported in liquid droplets with no need for a pre-defined/micromachined fluidic architecture. The fluid/solid boundary condition is important because it governs flow resistance and rheology and establishes the fluid velocity profile. Although many research groups are exploring SH surfaces, our team is the first to unambiguously determine their effects on fluid flow and rheology. SH surfaces could impact all future SNL designs of collectors, fluidic devices, MEMS, and NEMS. Interfaced with inertial focusing aerosol collectors, SH surfaces would allow size-specific particle populations to be collected, concentrated, and transported to a fluidic interface without loss. In microfluidic systems, we expect to reduce the energy/power required to pump fluids and actuate MEMS. Plug-like (rather than parabolic) velocity profiles can greatly improve resolution of chip-based separations and enable unprecedented control of concentration profiles and residence times in fluidic-based micro-reactors. Patterned SH/hydrophilic channels could induce mixing in microchannels and enable development of microflow control elements

  3. Planetary-Whigs: Optical MEMS-Based Seismometer Project

    Data.gov (United States)

    National Aeronautics and Space Administration — During this Phase I, Michigan Aerospace Corporation will adapt the design of an optical MEMS seismometer for lunar and other planetary science instrumentation. The...

  4. Tactical Grade MEMS IMUs for Spin-Stabilized Rockets Project

    Data.gov (United States)

    National Aeronautics and Space Administration — We propose a tactical grade MEMS IMU for spin-stabilized rockets for metric tracking and autonomous systems. The enabling instrument is a gyroscope designed for very...

  5. MEMS/Electronic Device Design and Characterization Facility

    Data.gov (United States)

    Federal Laboratory Consortium — This facility allows DoD to design and characterize state-of-the-art microelectromechanical systems (MEMS) and electronic devices. Device designers develop their own...

  6. Nanotwinned metal MEMS films with unprecedented strength and stability.

    Science.gov (United States)

    Sim, Gi-Dong; Krogstad, Jessica A; Reddy, K Madhav; Xie, Kelvin Y; Valentino, Gianna M; Weihs, Timothy P; Hemker, Kevin J

    2017-06-01

    Silicon-based microelectromechanical systems (MEMS) sensors have become ubiquitous in consumer-based products, but realization of an interconnected network of MEMS devices that allows components to be remotely monitored and controlled, a concept often described as the "Internet of Things," will require a suite of MEMS materials and properties that are not currently available. We report on the synthesis of metallic nickel-molybdenum-tungsten films with direct current sputter deposition, which results in fully dense crystallographically textured films that are filled with nanotwins. These films exhibit linear elastic mechanical behavior and tensile strengths exceeding 3 GPa, which is unprecedented for materials that are compatible with wafer-level device fabrication processes. The ultrahigh strength is attributed to a combination of solid solution strengthening and the presence of dense nanotwins. These films also have excellent thermal and mechanical stability, high density, and electrical properties that are attractive for next-generation metal MEMS applications.

  7. An analytical formulation for phase noise in MEMS oscillators.

    Science.gov (United States)

    Agrawal, Deepak; Seshia, Ashwin

    2014-12-01

    In recent years, there has been much interest in the design of low-noise MEMS oscillators. This paper presents a new analytical formulation for noise in a MEMS oscillator encompassing essential resonator and amplifier nonlinearities. The analytical expression for oscillator noise is derived by solving a second-order nonlinear stochastic differential equation. This approach is applied to noise modeling of an electrostatically addressed MEMS resonator-based square-wave oscillator in which the resonator and oscillator circuit nonlinearities are integrated into a single modeling framework. By considering the resulting amplitude and phase relations, we derive additional noise terms resulting from resonator nonlinearities. The phase diffusion of an oscillator is studied and the phase diffusion coefficient is proposed as a metric for noise optimization. The proposed nonlinear phase noise model provides analytical insight into the underlying physics and a pathway toward the design optimization for low-noise MEMS oscillators.

  8. Extreme-Precision MEMS Segmented Deformable Mirror Project

    Data.gov (United States)

    National Aeronautics and Space Administration — In Phase I research, Iris AO developed enhanced electromechanical models and calibration techniques for MEMS-based segmented deformable mirrors (DMs) applicable to a...

  9. High Speed Magnetostrictive MEMS Actuated Mirror Deflectors Project

    Data.gov (United States)

    National Aeronautics and Space Administration — The main goal of this proposal is to develop high speed magnetostrictive and MEMS actuators for rapidly deflecting or deforming mirrors. High speed, light-weight,...

  10. Ultra-Low-Power MEMS Selective Gas Sensors Project

    Data.gov (United States)

    National Aeronautics and Space Administration — KWJ offers this proposal for a very low power but very practical "nano-watt" MEMS sensor platform for NASA requirements. The proposed nano-sensor platform is ultra...

  11. High Speed Magnetostrictive MEMS Actuated Mirror Deflectors Project

    Data.gov (United States)

    National Aeronautics and Space Administration — We propose to develop high speed magnetostrictive and MEMS actuators for rapidly deflecting or deforming mirrors. High speed, light-weight, low voltage beam...

  12. Feedback Control of MEMS to Atoms

    CERN Document Server

    Shapiro, Benjamin

    2012-01-01

    Feedback Control of MEMS to Atoms illustrates the use of control and control systems as an essential part of functioning integrated miniaturized systems. The book is organized according to the dimensional scale of the problem, starting with microscale systems and ending with atomic-scale systems. Similar to macroscale machines and processes, control systems can play a major role in improving the performance of micro- and nanoscale systems and in enabling new capabilities that would otherwise not be possible. The majority of problems at these scales present many new challenges that go beyond the current state-of-the-art in control theory and engineering. This is a result of the multidisciplinary nature of micro/nanotechnology, which requires the merging of control engineering with physics, biology and chemistry. This book: Shows how the utilization of feedback control in nanotechnology instrumentation can yield results far better than passive systems can Discusses the application of control systems to problems...

  13. Torsion based universal MEMS logic device

    KAUST Repository

    Ilyas, Saad

    2015-10-28

    In this work we demonstrate torsion based complementary MEMS logic device, which is capable, of performing INVERTER, AND, NAND, NOR, and OR gates using one physical structure within an operating range of 0-10 volts. It can also perform XOR and XNOR with one access inverter using the same structure with different electrical interconnects. The paper presents modeling, fabrication and experimental calculations of various performance features of the device including lifetime, power consumption and resonance frequency. The fabricated device is 535 μm by 150 μm with a gap of 1.92 μm and a resonant frequency of 6.51 kHz. The device is capable of performing the switching operation with a frequency of 1 kHz.

  14. Wideband MEMS Resonator Using Multifrequency Excitation

    KAUST Repository

    Jaber, Nizar

    2016-03-09

    We demonstrate the excitation of combination resonances of additive and subtractive types and their exploitations to realize a large bandwidth micro-machined resonator of large amplitude even at higher harmonic modes of vibrations. The investigation is conducted on a Microelectromechanical systems (MEMS) clamped-clamped microbeam fabricated using polyimide as a structural layer coated with nickel from top and chromium and gold layers from bottom. The microbeam is excited by a two-source harmonic excitation, where the first frequency source is swept around the targeted resonance (first or third mode of vibration) while the second source frequency is kept fixed. We report for the first time a large bandwidth and large amplitude response near the higher order modes of vibration. Also, we show that by properly tuning the frequency and amplitude of the excitation force, the frequency bandwidth of the resonator is controlled.

  15. MEMS switches having non-metallic crossbeams

    Science.gov (United States)

    Scardelletti, Maximillian C (Inventor)

    2009-01-01

    A RF MEMS switch comprising a crossbeam of SiC, supported by at least one leg above a substrate and above a plurality of transmission lines forming a CPW. Bias is provided by at least one layer of metal disposed on a top surface of the SiC crossbeam, such as a layer of chromium followed by a layer of gold, and extending beyond the switch to a biasing pad on the substrate. The switch utilizes stress and conductivity-controlled non-metallic thin cantilevers or bridges, thereby improving the RF characteristics and operational reliability of the switch. The switch can be fabricated with conventional silicon integrated circuit (IC) processing techniques. The design of the switch is very versatile and can be implemented in many transmission line mediums.

  16. Highly Tunable Narrow Bandpass MEMS Filter

    KAUST Repository

    Hafiz, Md Abdullah Al

    2017-07-07

    We demonstrate a proof-of-concept highly tunable narrow bandpass filter based on electrothermally and electrostatically actuated microelectromechanical-system (MEMS) resonators. The device consists of two mechanically uncoupled clamped-clamped arch resonators, designed such that their resonance frequencies are independently tuned to obtain the desired narrow passband. Through the electrothermal and electrostatic actuation, the stiffness of the structures is highly tunable. We experimentally demonstrate significant percentage tuning (~125%) of the filter center frequency by varying the applied electrothermal voltages to the resonating structures, while maintaining a narrow passband of 550 ± 50 Hz, a stopband rejection of >17 dB, and a passband ripple ≤ 2.5 dB. An analytical model based on the Euler-Bernoulli beam theory is used to confirm the behavior of the filter, and the origin of the high tunability using electrothermal actuation is discussed.

  17. Strong Motion Seismograph Based On MEMS Accelerometer

    Science.gov (United States)

    Teng, Y.; Hu, X.

    2013-12-01

    The MEMS strong motion seismograph we developed used the modularization method to design its software and hardware.It can fit various needs in different application situation.The hardware of the instrument is composed of a MEMS accelerometer,a control processor system,a data-storage system,a wired real-time data transmission system by IP network,a wireless data transmission module by 3G broadband,a GPS calibration module and power supply system with a large-volumn lithium battery in it. Among it,the seismograph's sensor adopted a three-axis with 14-bit high resolution and digital output MEMS accelerometer.Its noise level just reach about 99μg/√Hz and ×2g to ×8g dynamically selectable full-scale.Its output data rates from 1.56Hz to 800Hz. Its maximum current consumption is merely 165μA,and the device is so small that it is available in a 3mm×3mm×1mm QFN package. Furthermore,there is access to both low pass filtered data as well as high pass filtered data,which minimizes the data analysis required for earthquake signal detection. So,the data post-processing can be simplified. Controlling process system adopts a 32-bit low power consumption embedded ARM9 processor-S3C2440 and is based on the Linux operation system.The processor's operating clock at 400MHz.The controlling system's main memory is a 64MB SDRAM with a 256MB flash-memory.Besides,an external high-capacity SD card data memory can be easily added.So the system can meet the requirements for data acquisition,data processing,data transmission,data storage,and so on. Both wired and wireless network can satisfy remote real-time monitoring, data transmission,system maintenance,status monitoring or updating software.Linux was embedded and multi-layer designed conception was used.The code, including sensor hardware driver,the data acquisition,earthquake setting out and so on,was written on medium layer.The hardware driver consist of IIC-Bus interface driver, IO driver and asynchronous notification driver. The

  18. MEMS product engineering: methodology and tools

    Science.gov (United States)

    Ortloff, Dirk; Popp, Jens; Schmidt, Thilo; Hahn, Kai; Mielke, Matthias; Brück, Rainer

    2011-03-01

    The development of MEMS comprises the structural design as well as the definition of an appropriate manufacturing process. Technology constraints have a considerable impact on the device design and vice-versa. Product design and technology development are therefore concurrent tasks. Based on a comprehensive methodology the authors introduce a software environment that links commercial design tools from both area into a common design flow. In this paper emphasis is put on automatic low threshold data acquisition. The intention is to collect and categorize development data for further developments with minimum overhead and minimum disturbance of established business processes. As a first step software tools that automatically extract data from spreadsheets or file-systems and put them in context with existing information are presented. The developments are currently carried out in a European research project.

  19. Ultra-Low-Power MEMS Selective Gas Sensors

    Science.gov (United States)

    Stetter, Joseph

    2012-01-01

    This innovation is a system for gas sensing that includes an ultra-low-power MEMS (microelectromechanical system) gas sensor, combined with unique electronic circuitry and a proprietary algorithm for operating the sensor. The electronics were created from scratch, and represent a novel design capable of low-power operation of the proprietary MEMS gas sensor platform. The algorithm is used to identify a specific target gas in a gas mixture, making the sensor selective to that target gas.

  20. Mechanical Robustness and Hermeticity Monitoring for MEMS Thin Film Encapsulation

    OpenAIRE

    Santagata, F.

    2011-01-01

    Many Micro-Electro-Mechanical-Systems (MEMS) require encapsulation, to prevent delicate sensor structures being exposed to external perturbations such as dust, humidity, touching, and gas pressure. An upcoming and cost-effective way of encapsulation is zero-level packaging or thin-film encapsulation. With this method, MEMS are already sealed during wafer processing. Thin-film encapsulation poses a number of challenges, in particular to hermeticity, mechanical robustness, and compatibility wit...

  1. Performance Analysis of Alignment Process of MEMS IMU

    Directory of Open Access Journals (Sweden)

    Vadim Bistrov

    2012-01-01

    Full Text Available The procedure of determining the initial values of the attitude angles (pitch, roll, and heading is known as the alignment. Also, it is essential to align an inertial system before the start of navigation. Unless the inertial system is not aligned with the vehicle, the information provided by MEMS (microelectromechanical system sensors is not useful for navigating the vehicle. At the moment MEMS gyroscopes have poor characteristics and it’s necessary to develop specific algorithms in order to obtain the attitude information of the object. Most of the standard algorithms for the attitude estimation are not suitable when using MEMS inertial sensors. The wavelet technique, the Kalman filter, and the quaternion are not new in navigation data processing. But the joint use of those techniques for MEMS sensor data processing can give some new results. In this paper the performance of a developed algorithm for the attitude estimation using MEMS IMU (inertial measurement unit is tested. The obtained results are compared with the attitude output of another commercial GPS/IMU device by Xsens. The impact of MEMS sensor measurement noises on an alignment process is analysed. Some recommendations for the Kalman filter algorithm tuning to decrease standard deviation of the attitude estimation are given.

  2. MEMS IMU Error Mitigation Using Rotation Modulation Technique.

    Science.gov (United States)

    Du, Shuang; Sun, Wei; Gao, Yang

    2016-11-29

    Micro-electro-mechanical-systems (MEMS) inertial measurement unit (IMU) outputs are corrupted by significant sensor errors. The navigation errors of a MEMS-based inertial navigation system will therefore accumulate very quickly over time. This requires aiding from other sensors such as Global Navigation Satellite Systems (GNSS). However, it will still remain a significant challenge in the presence of GNSS outages, which are typically in urban canopies. This paper proposed a rotary inertial navigation system (INS) to mitigate navigation errors caused by MEMS inertial sensor errors when external aiding information is not available. A rotary INS is an inertial navigator in which the IMU is installed on a rotation platform. Application of proper rotation schemes can effectively cancel and reduce sensor errors. A rotary INS has the potential to significantly increase the time period that INS can bridge GNSS outages and make MEMS IMU possible to maintain longer autonomous navigation performance when there is no external aiding. In this research, several IMU rotation schemes (rotation about X-, Y- and Z-axes) are analyzed to mitigate the navigation errors caused by MEMS IMU sensor errors. As the IMU rotation induces additional sensor errors, a calibration process is proposed to remove the induced errors. Tests are further conducted with two MEMS IMUs installed on a tri-axial rotation table to verify the error mitigation by IMU rotations.

  3. Development of the micro pixel chamber based on MEMS technology

    Directory of Open Access Journals (Sweden)

    Takemura T.

    2018-01-01

    Full Text Available Micro pixel chambers (μ-PIC are gaseous two-dimensional imaging detectors originally manufactured using printed circuit board (PCB technology. They are used in MeV gamma-ray astronomy, medicalimaging, neutron imaging, the search for dark matter, and dose monitoring. The position resolution of the present μ-PIC is approximately 120 μm (RMS, however some applications require a fine position resolution of less than 100 μm. To this end, we have started to develop a μ-PIC based on micro electro mechanical system (MEMS technology, which provides better manufacturing accuracy than PCB technology. Our simulation predicted the gains of MEMS μ-PICs to be twice those of PCB μ-PICs at the same anode voltage. We manufactured two MEMS μ-PICs and tested them to study their behavior. In these experiments, we successfully operated the fabricatedMEMS μ-PICs and we achieved a maximum gain of approximately 7×103 and collected their energy spectra under irradiation of X-rays from 55Fe. However, the measured gains of the MEMS μ-PICs were less than half of the values predicted in the simulations. We postulated that the gains of the MEMS μ-PICs are diminished by the effect of the silicon used as a semiconducting substrate.

  4. MEMS Reliability: Infrastructure, Test Structures, Experiments, and Failure Modes

    Energy Technology Data Exchange (ETDEWEB)

    TANNER,DANELLE M.; SMITH,NORMAN F.; IRWIN,LLOYD W.; EATON,WILLIAM P.; HELGESEN,KAREN SUE; CLEMENT,J. JOSEPH; MILLER,WILLIAM M.; MILLER,SAMUEL L.; DUGGER,MICHAEL T.; WALRAVEN,JEREMY A.; PETERSON,KENNETH A.

    2000-01-01

    The burgeoning new technology of Micro-Electro-Mechanical Systems (MEMS) shows great promise in the weapons arena. We can now conceive of micro-gyros, micro-surety systems, and micro-navigators that are extremely small and inexpensive. Do we want to use this new technology in critical applications such as nuclear weapons? This question drove us to understand the reliability and failure mechanisms of silicon surface-micromachined MEMS. Development of a testing infrastructure was a crucial step to perform reliability experiments on MEMS devices and will be reported here. In addition, reliability test structures have been designed and characterized. Many experiments were performed to investigate failure modes and specifically those in different environments (humidity, temperature, shock, vibration, and storage). A predictive reliability model for wear of rubbing surfaces in microengines was developed. The root causes of failure for operating and non-operating MEMS are discussed. The major failure mechanism for operating MEMS was wear of the polysilicon rubbing surfaces. Reliability design rules for future MEMS devices are established.

  5. MEMS IMU Error Mitigation Using Rotation Modulation Technique

    Directory of Open Access Journals (Sweden)

    Shuang Du

    2016-11-01

    Full Text Available Micro-electro-mechanical-systems (MEMS inertial measurement unit (IMU outputs are corrupted by significant sensor errors. The navigation errors of a MEMS-based inertial navigation system will therefore accumulate very quickly over time. This requires aiding from other sensors such as Global Navigation Satellite Systems (GNSS. However, it will still remain a significant challenge in the presence of GNSS outages, which are typically in urban canopies. This paper proposed a rotary inertial navigation system (INS to mitigate navigation errors caused by MEMS inertial sensor errors when external aiding information is not available. A rotary INS is an inertial navigator in which the IMU is installed on a rotation platform. Application of proper rotation schemes can effectively cancel and reduce sensor errors. A rotary INS has the potential to significantly increase the time period that INS can bridge GNSS outages and make MEMS IMU possible to maintain longer autonomous navigation performance when there is no external aiding. In this research, several IMU rotation schemes (rotation about X-, Y- and Z-axes are analyzed to mitigate the navigation errors caused by MEMS IMU sensor errors. As the IMU rotation induces additional sensor errors, a calibration process is proposed to remove the induced errors. Tests are further conducted with two MEMS IMUs installed on a tri-axial rotation table to verify the error mitigation by IMU rotations.

  6. MEMS packaging with etching and thinning of lid wafer to form lids and expose device wafer bond pads

    Science.gov (United States)

    Chanchani, Rajen; Nordquist, Christopher; Olsson, Roy H; Peterson, Tracy C; Shul, Randy J; Ahlers, Catalina; Plut, Thomas A; Patrizi, Gary A

    2013-12-03

    In wafer-level packaging of microelectromechanical (MEMS) devices a lid wafer is bonded to a MEMS wafer in a predermined aligned relationship. Portions of the lid wafer are removed to separate the lid wafer into lid portions that respectively correspond in alignment with MEMS devices on the MEMS wafer, and to expose areas of the MEMS wafer that respectively contain sets of bond pads respectively coupled to the MEMS devices.

  7. Liquid Metal Droplet and Micro Corrugated Diaphragm RF-MEMS for reconfigurable RF filters

    Science.gov (United States)

    Irshad, Wasim

    methodology for relevant applications. To further demonstrate MCD versatility, we implement a bandstop MCD filter that cascades nine separate resonators to achieve a 6-24 GHz continuous tuning. The disseration concludes with a Galinstan Magnetohydrodynamic (MHD) micropump and summary of my doctoral work. Although presented at the very end of this dissertation, the MHD micropump was indeed the very starting point for all my doctoral research efforts. The invaluable lessons learned here paved the way for development of both LMD and MCD RF-MEMS.

  8. Commercializing MEMS--too fast or too slow? (Same as Vols. 2880 and 2881, p. 12)

    Science.gov (United States)

    Walsh, S.; Carr, W. N.; Mados, H.; Narang, D. S.

    1996-09-01

    MEMS as a technology base is coming of age, butas in any vital process growing pains occur. Commercializing MEMS is simultaneously viewed asagonizingly slow by many ofits promoters and lightingly quick by many companies whose products are being replaced with MEMS based substitutes. This effort ties current efforts in market analysis, technology evaluations, competency based strategy in an effort to understand the pace ofMEMS commercialization.

  9. Modular packaging concept for MEMS and MOEMS

    Science.gov (United States)

    Stenchly, Vanessa; Reinert, Wolfgang; Quenzer, Hans-Joachim

    2017-11-01

    Wherever technical systems detect objects in their environment or interact with people, optical devices may play an important role. Light can be relatively easily produced and spatially and temporally modulated. Laser can project sharp images over long distances or cut materials in short distances. Depending on the wavelength an invisible scanning in near infrared for gesture recognition is possible as well as a projection of brilliant colour images. For several years, the Fraunhofer ISIT develops Opto-Packaging processes based on the viscous reshaping of glass wafers: First, hermetically sealed laser micro-mirror scanners WLP with inclined windows deflect in the central light reflex of the window out of the image area. Second, housing with lateral light exit permits hermetic sealing of edge-emitting lasers for highest reliability and durability. Such systems are currently experiencing an extremely high interest of the industry in all segments, from consumer to automotive through to materials processing. Our modular Opto-Packaging platform enables fast product developments. Housing for opto mechanical MEMS devices are equipped with inclined windows to minimize distortion, stray light and reflection losses. The hot viscous glass forming technology is also applied to functionalized substrate wafers which possess areas with high heat dissipation in addition to thermally insulating areas. Electrical contacts may be realized with metal filled vias or TGV (Through Glass Vias). The modular system reduces the development times for new, miniaturized optical systems so that manufacturers can focus on the essentials in their development, namely their product functionalities.

  10. MEMS tactile display: from fabrication to characterization

    Science.gov (United States)

    Miki, Norihisa; Kosemura, Yumi; Watanabe, Junpei; Ishikawa, Hiroaki

    2014-03-01

    We report fabrication and characterization of MEMS-based tactile display that can display users various tactile information, such as Braille codes and surface textures. The display consists of 9 micro-actuators that are equipped with hydraulic displacement amplification mechanism (HDAM) to achieve large enough displacement to stimulate the human tactile receptors. HDAM encapsulates incompressible liquids. We developed a liquid encapsulation process, which we termed as Bonding-in-Liquid Technique, where bonding with a UV-curable resin in glycerin is conducted in the liquid, which prevented interfusion of air bubbles and deformation of the membrane during the bonding. HDAM successfully amplified the displacement generated by piezoelectric actuators by a factor of 6. The display could virtually produce "rough" and "smooth" surfaces, by controlling the vibration frequency, displacement, and the actuation periods of an actuator until the adjacent actuator was driven. We introduced a sample comparison method to characterize the surfaces, which involves human tactile sensation. First, we prepared samples whose mechanical properties are known. We displayed a surface texture to the user by controlling the parameters and then, the user selects a sample that has the most similar surface texture. By doing so, we can correlate the parameters with the mechanical properties of the sample as well as find the sets of the parameters that can provide similar tactile information to many users. The preliminary results with respect to roughness and hardness is presented.

  11. MEMS tandem ion-sorption micropump

    Science.gov (United States)

    Grzebyk, T.

    2017-12-01

    This paper presents a two-stage MEMS ion-sorption micropump, which works in a wide range of pressures—it allows efficient evacuation of gases from the internal volume of any microsystem starting from atmospheric pressure down to 10‑6 hPa. The miniature pre-vacuum pump is realized as a two-electrode silicon–glass structure with a very close inter-electrode distance. The use of the silicon substrate as a getter material instead of a metallic layer significantly increases the pumping capacity and as a result, the initial pressure can be reduced to a level of 1 hPa. From this point the pumping is continued with the second glow-discharge high vacuum micropump. This pump is a multilayer structure, in which ions are trapped in crossed electric and magnetic fields. It allows further reduction of pressure down to 10‑6 hPa. Both pumps are technologically compatible and together they enable the on-chip generation of avacuum at the desired level in a variety of miniaturized devices.

  12. Nonlinear Dynamics of Electrostatically Actuated MEMS Arches

    KAUST Repository

    Al Hennawi, Qais M.

    2015-05-01

    In this thesis, we present theoretical and experimental investigation into the nonlinear statics and dynamics of clamped-clamped in-plane MEMS arches when excited by an electrostatic force. Theoretically, we first solve the equation of motion using a multi- mode Galarkin Reduced Order Model (ROM). We investigate the static response of the arch experimentally where we show several jumps due to the snap-through instability. Experimentally, a case study of in-plane silicon micromachined arch is studied and its mechanical behavior is measured using optical techniques. We develop an algorithm to extract various parameters that are needed to model the arch, such as the induced axial force, the modulus of elasticity, and the initially induced initial rise. After that, we excite the arch by a DC electrostatic force superimposed to an AC harmonic load. A softening spring behavior is observed when the excitation is close to the first resonance frequency due to the quadratic nonlinearity coming from the arch geometry and the electrostatic force. Also, a hardening spring behavior is observed when the excitation is close to the third (second symmetric) resonance frequency due to the cubic nonlinearity coming from mid-plane stretching. Then, we excite the arch by an electric load of two AC frequency components, where we report a combination resonance of the summed type. Agreement is reported among the theoretical and experimental work.

  13. MEMS based impedimetric sensing of phthalates

    KAUST Repository

    Zia, Asif I.

    2013-05-01

    Phthalate esters are known ubiquitous teratogenic and carcinogenic environmental and food pollutants. Their detection and quantification is strictly laboratory based, time consuming, expensive and professionally handled procedure. Presented research work describes a real time non-invasive detection technique for phthalates detection in ethanol, water and drinks. The new type of inter-digital sensor design incorporating multiple sensing gold electrodes were fabricated on silicon substrate based on thin film micro-electromechanical system (MEMS) using semiconductor device fabrication technology. A passivation layer of Silicon Nitride (Si3N4) was used to functionalize the sensor. Various concentrations (0.1 to 20ppm) of DINP (di-isononyl phthalates) in ethanol and di (2-ethylhexyl) phthalate (DEHP) in deionized MilliQ water were subjected to the testing system by dip testing method. Electrochemical impedance spectroscopy (EIS) technique was used to obtain impedance spectra in order to determine sample conductance for evaluation of its dielectric properties. The impedance spectra so obtained showed that the sensor was able to detect the presence of phthalates in the samples distinctively. Electrochemical Spectrum Analyser was used to model the experimentally obtained impedance spectra by curve fitting technique to figure out Constant Phase Element (CPE) equivalent circuit. Locally available energy drink and juice was added with phthalates in concentrations of 2, 6 and 10ppm to observe the performance of the sensor in such products. Experimental results showed that the new sensor was able to detect different concentrations of phthalates in energy drinks. © 2013 IEEE.

  14. Thin Silicon MEMS Contact-Stress Sensor

    Energy Technology Data Exchange (ETDEWEB)

    Kotovsky, J; Tooker, A; Horsley, D A

    2009-12-07

    This work offers the first, thin, MEMS contact-stress (CS) sensor capable of accurate in situ measruement of time-varying, contact-stress between two solid interfaces (e.g. in vivo cartilage contact-stress and body armor dynamic loading). This CS sensor is a silicon-based device with a load sensitive diaphragm. The diaphragm is doped to create piezoresistors arranged in a full Wheatstone bridge. The sensor is similar in performance to established silicon pressure sensors, but it is reliably produced to a thickness of 65 {micro}m. Unlike commercial devices or other research efforts, this CS sensor, including packaging, is extremely thin (< 150 {micro}m fully packaged) so that it can be unobtrusively placed between contacting structures. It is built from elastic, well-characterized materials, providing accurate and high-speed (50+ kHz) measurements over a potential embedded lifetime of decades. This work explored sensor designs for an interface load range of 0-2 MPa; however, the CS sensor has a flexible design architecture to measure a wide variety of interface load ranges.

  15. MEMS Logic Using Mixed-Frequency Excitation

    KAUST Repository

    Ilyas, Saad

    2017-06-22

    We present multi-function microelectromechanical systems (MEMS) logic device that can perform the fundamental logic gate AND, OR, universal logic gates NAND, NOR, and a tristate logic gate using mixed-frequency excitation. The concept is based on exciting combination resonances due to the mixing of two or more input signals. The device vibrates at two steady states: a high state when the combination resonance is activated and a low state when no resonance is activated. These vibration states are assigned to logical value 1 or 0 to realize the logic gates. Using ac signals to drive the resonator and to execute the logic inputs unifies the input and output wave forms of the logic device, thereby opening the possibility for cascading among logic devices. We found that the energy consumption per cycle of the proposed logic resonator is higher than those of existing technologies. Hence, integration of such logic devices to build complex computational system needs to take into consideration lowering the total energy consumption. [2017-0041

  16. Feasibility of tunable MEMS photonic crystal devices.

    Science.gov (United States)

    Rajic, S; Corbeil, J L; Datskos, P G

    2003-01-01

    Periodic photonic crystal structures channel electromagnetic waves much as semiconductors/quantum wells channel electrons. Photonic bandgap crystals (PBC) are fabricated by arranging sub-wavelength alternating materials with high and low dielectric constants to produce a desired effective bandgap. Photons with energy within this bandgap cannot propagate through the structure. This property has made these structures useful for microwave applications such as frequency-selective surfaces, narrowband filters, and antenna substrates when the dimensions are on the order of millimeters. They are also potentially very useful, albeit much more difficult to fabricate, in the visible/near-infrared region for various applications when the smallest dimensions are at the edge of current micro-lithography fabrication tools. We micro-fabricated suspended free standing micro-structure bridge waveguides to serve as substrates for PBC features. These micro-bridges were fabricated onto commercial silicon-on-insulator wafers. Nanoscale periodic features were fabricated onto these micro-structure bridges to form a tunable system. When this combined structure is perturbed, such as mechanical deflection of the suspended composite structure at resonance, there can be a realtime shift in the material effective bandgap due to slight geometric alterations due to the induced mechanical stress. Extremely high resonance frequencies/device speeds are possible with these very small dimension MEMS.

  17. Differentially-driven MEMS spatial light modulator

    Science.gov (United States)

    Stappaerts, Eddy A.

    2004-09-14

    A MEMS SLM and an electrostatic actuator associated with a pixel in an SLM. The actuator has three electrodes: a lower electrode; an upper electrode fixed with respect to the lower electrode; and a center electrode suspended and actuable between the upper and lower electrodes. The center electrode is capable of resiliently-biasing to restore the center electrode to a non-actuated first equilibrium position, and a mirror is operably connected to the center electrode. A first voltage source provides a first bias voltage across the lower and center electrodes and a second voltage source provides a second bias voltage across the upper and center electrodes, with the first and second bias voltages determining the non-actuated first equilibrium position of the center electrode. A third voltage source provides a variable driver voltage across one of the lower/center and upper/center electrode pairs in series with the corresponding first or second bias voltage, to actuate the center electrode to a dynamic second equilibrium position.

  18. Advanced MEMS spectral sensor for the NIR

    Science.gov (United States)

    Antila, Jarkko E.; Kantojärvi, Uula; Mäkynen, Jussi; Tammi, Matti; Suhonen, Janne

    2015-02-01

    Near Infrared (NIR) spectrometers are widely used in many fields to measure material content, such as moisture, fat and protein in grains, foodstuffs and pharmaceutical powders. These fields include applications where only highly miniaturized and robust NIR sensors can be used due to small usable space, weight requirements and/or hostile working environment. Handheld devices for material inspection, online process automation and automotive industry introduce requirements for size, robustness and cost, which is currently difficult to meet. In this paper we present an advanced spectral sensor based on a tunable Microelectromechanical (MEMS) Fabry-Perot Interferometer. The sensor is fibercoupled, weighs 125 grams and fits to an envelope of 25x55x55 mm3. Three types of sensors cover the wavelength ranges from 1.35-1.7 μm, 1.55-2.0 μm and 1.7-2.2 μm, utilizing only a single pixel extended InGaAs detector, avoiding the expensive linear array detectors. We describe the design, principle of operation and calibration methods together with the control schemes. Some environmental tests are described and their results and finally application measurement results are presented along with discussion and conclusions.

  19. MEMS-Based Multi-Analyte Biosensor

    Science.gov (United States)

    Chan, I. H.; Sohn, L. L.

    2004-03-01

    We present a MEMS-based multi-analyte biosensor consisting of an array of micropores ( ˜1 μm diameter) fabricated on a single chip. The micropores are embedded in PDMS using micromolding techniques, and then sealed to a glass substrate that has previously-defined electrodes for electrical measurement of the pores. Detection of analytes is accomplished using a resistive pulse technique [1-3] which senses the change in size (as small as 2 nm) of derivatized colloids when they react with different analytes. Each pore can sense several analytes if derivatized colloids of different sizes are employed; consequently, an array of pores can be used to detect a large number of analytes simultaneously on a single chip. In this talk, we will describe our multipore array sensor and present preliminary results demonstrating its capabilities. 1. O.A. Saleh and L.L. Sohn, Rev. Sci. Inst. 72, 4449 (2001). 2. O.A. Saleh and L.L. Sohn, NanoLetters 3, 37 (2003). 3. O.A. Saleh and L.L. Sohn, PNAS 100, 820 (2003).

  20. New Endoscopic Imaging Technology Based on MEMS Sensors and Actuators

    Directory of Open Access Journals (Sweden)

    Zhen Qiu

    2017-07-01

    Full Text Available Over the last decade, optical fiber-based forms of microscopy and endoscopy have extended the realm of applicability for many imaging modalities. Optical fiber-based imaging modalities permit the use of remote illumination sources and enable flexible forms supporting the creation of portable and hand-held imaging instrumentations to interrogate within hollow tissue cavities. A common challenge in the development of such devices is the design and integration of miniaturized optical and mechanical components. Until recently, microelectromechanical systems (MEMS sensors and actuators have been playing a key role in shaping the miniaturization of these components. This is due to the precision mechanics of MEMS, microfabrication techniques, and optical functionality enabling a wide variety of movable and tunable mirrors, lenses, filters, and other optical structures. Many promising results from MEMS based optical fiber endoscopy have demonstrated great potentials for clinical translation. In this article, reviews of MEMS sensors and actuators for various fiber-optical endoscopy such as fluorescence, optical coherence tomography, confocal, photo-acoustic, and two-photon imaging modalities will be discussed. This advanced MEMS based optical fiber endoscopy can provide cellular and molecular features with deep tissue penetration enabling guided resections and early cancer assessment to better treatment outcomes.

  1. Poly-SiGe for MEMS-above-CMOS sensors

    CERN Document Server

    Gonzalez Ruiz, Pilar; Witvrouw, Ann

    2014-01-01

    Polycrystalline SiGe has emerged as a promising MEMS (Microelectromechanical Systems) structural material since it provides the desired mechanical properties at lower temperatures compared to poly-Si, allowing the direct post-processing on top of CMOS. This CMOS-MEMS monolithic integration can lead to more compact MEMS with improved performance. The potential of poly-SiGe for MEMS above-aluminum-backend CMOS integration has already been demonstrated. However, aggressive interconnect scaling has led to the replacement of the traditional aluminum metallization by copper (Cu) metallization, due to its lower resistivity and improved reliability. Poly-SiGe for MEMS-above-CMOS sensors demonstrates the compatibility of poly-SiGe with post-processing above the advanced CMOS technology nodes through the successful fabrication of an integrated poly-SiGe piezoresistive pressure sensor, directly fabricated above 0.13 m Cu-backend CMOS. Furthermore, this book presents the first detailed investigation on the influence o...

  2. Gamma-ray irradiation of ohmic MEMS switches

    Science.gov (United States)

    Maciel, John J.; Lampen, James L.; Taylor, Edward W.

    2012-10-01

    Radio Frequency (RF) Microelectromechanical System (MEMS) switches are becoming important building blocks for a variety of military and commercial applications including switch matrices, phase shifters, electronically scanned antennas, switched filters, Automatic Test Equipment, instrumentation, cell phones and smart antennas. Low power consumption, large ratio of off-impedance to on-impedance, extreme linearity, low mass, small volume and the ability to be integrated with other electronics makes MEMS switches an attractive alternative to other mechanical and solid-state switches for a variety of space applications. Radant MEMS, Inc. has developed an electrostatically actuated broadband ohmic microswitch that has applications from DC through the microwave region. Despite the extensive earth based testing, little is known about the performance and reliability of these devices in space environments. To help fill this void, we have irradiated our commercial-off-the-shelf SPST, DC to 40 GHz MEMS switches with gamma-rays as an initial step to assessing static impact on RF performance. Results of Co-60 gamma-ray irradiation of the MEMS switches at photon energies ≥ 1.0 MeV to a total dose of ~ 118 krad(Si) did not show a statistically significant post-irradiation change in measured broadband, RF insertion loss, insertion phase, return loss and isolation.

  3. Memória de longo prazo modulada pela memória de curto prazo

    Directory of Open Access Journals (Sweden)

    Viviane Moreira-Aguiar

    2008-01-01

    Full Text Available Quando um estímulo ocorre aleatoriamente à esquerda ou à direita, a resposta é mais rápida quando estímulo e resposta estão no mesmo lado (condição compatível do que em lados opostos (condição incompatível. Na tarefa de Simon, embora a resposta seja selecionada pela forma (ou cor do estímulo, a posição deste influencia o Tempo de Reação Manual (TRM. O efeito Simon corresponde à diferença entre as médias dos TRMs nas duas condições (incompatível e compatível. Neste trabalho, estudamos como uma tarefa prévia de compatibilidade realizada com um dedo indicador modula o efeito Simon. Vinte e oito voluntários realizaram uma tarefa de compatibilidade seguida pela tarefa de Simon. No grupo compatível (14 voluntários, encontramos um efeito Simon de 24 ms. No incompatível (14 voluntários, ocorreu um efeito Simon inverso de -16 ms. Estes resultados mostram uma modulação da memória de longo prazo por uma tarefa envolvendo a memória de curto prazo.

  4. The 2013 Workshop on Electromagnetic and Mechanical Effects in Superconductors (MEM13) The 2013 Workshop on Electromagnetic and Mechanical Effects in Superconductors (MEM13)

    Science.gov (United States)

    Mitchell, Neil

    2013-11-01

    The 2013 MEM workshop is the sixth in the series and proved to be one of the largest, with over 60 participants and over 40 presentations. Only a small selection of these presentations have progressed from PowerPoint to a reviewed paper accepted for publication in Superconductor Science and Technology (SUST). However, the dynamics of a good workshop should not be judged solely by the output of high quality papers. The interplay between electromagnetic and mechanical effects in superconductors is proving to be one of the critical issues in understanding the factors that dominate the practical application of not only the more traditional low temperature superconductors (LTS) but also, perhaps surprisingly, the high temperature superconductors (HTS) materials too. The lessons learned in the design and the diagnostic techniques which have been developed for LTS now overlap into the HTS field. The MEM13 workshop provided an opportunity for informal discussion across these fields, to the benefit of all. The topics of the workshop were selected to allow, as far as practically possible, co-presentation of LTS and HTS materials, as follows: Electro-mechanical effects on practical conductor performance. Analysis of electro-mechanical effects. Diagnosis of electro-mechanical effects. Strain dependence. Simulations and standardized tests for electro-mechanical effects. Microstructure, properties and sensitivity. Coated conductors. Manufacture of LTS and HTS conductors. The papers were wide ranging, covering basic manufacturing issues through to sophisticated testing and advanced diagnosis tools. The MEM13 workshop provided many papers based on the ITER construction, and diagnoses using the large quantity of data available from the industrial scale fabrication and testing of ITER conductors, as well as papers on the frontiers of HTS industrial technologies. It was clear that the huge industrial fabrication of Nb3Sn conductors for ITER, and the associated test programmes, have

  5. Microelectromechanical System (MEMS) Gyroscope Noise Analysis and Scale Factor Characterization over Temperature Variation

    Science.gov (United States)

    2016-07-01

    ARL-TR-7718 ● JULY 2016 US Army Research Laboratory Microelectromechanical System (MEMS) Gyroscope Noise Analysis and Scale...JULY 2016 US Army Research Laboratory Microelectromechanical System (MEMS) Gyroscope Noise Analysis and Scale Factor Characterization...System (MEMS) Gyroscope Noise Analysis and Scale Factor Characterization over Temperature Variation 5a. CONTRACT NUMBER 5b. GRANT NUMBER 5c

  6. INVESTIGATION OF TITANIUM BONDED GRAPHITE FOAM COMPOSITES FOR MICRO ELECTRONIC MECHANICAL SYSTEMS (MEMS) APPLICATIONS

    Energy Technology Data Exchange (ETDEWEB)

    Menchhofer, Paul A [ORNL; Bozorgi, Payam [ORNL

    2016-04-01

    PiMEMS Inc. (Santa Barbara, CA) in collaboration with ORNL investigated the use of Titanium Bonded Graphite Foam Composites (TBGC) for thermal mitigation in Micro Electronic Mechanical Systems (MEMS) applications. Also considered were potentially new additive manufacturing routes to producing novel high surface area micro features and diverse shaped heat transfer components for numerous lightweight MEMs applications.

  7. Optical measurement methods to study dynamic behavior in MEMS

    Science.gov (United States)

    Rembe, Christian; Kant, Rishi; Muller, Richard S.

    2001-10-01

    The maturing designs of moving microelectromechanical systems (MEMS) make it more-and-more important to have precise measurements and visual means to characterize dynamic microstructures. The Berkeley Sensor&Actuator Center (BSAC) has a forefront project aimed at developing these capabilities and at providing high-speed Internet (Supernet) access for remote use of its facilities. Already in operation are three optical-characterization tools: a stroboscopic-interferometer system, a computer-microvision system, and a laser-Doppler vibrometer. This paper describes precision and limitations of these systems and discusses their further development. In addition, we describe the results of experimental studies on the different MEMS devices, and give an overview about high-speed visualization of rapidly moving MEMS structures.

  8. Integrated Magnetic MEMS Relays: Status of the Technology

    Directory of Open Access Journals (Sweden)

    Giuseppe Schiavone

    2014-08-01

    Full Text Available The development and application of magnetic technologies employing microfabricated magnetic structures for the production of switching components has generated enormous interest in the scientific and industrial communities over the last decade. Magnetic actuation offers many benefits when compared to other schemes for microelectromechanical systems (MEMS, including the generation of forces that have higher magnitude and longer range. Magnetic actuation can be achieved using different excitation sources, which create challenges related to the integration with other technologies, such as CMOS (Complementary Metal Oxide Semiconductor, and the requirement to reduce power consumption. Novel designs and technologies are therefore sought to enable the use of magnetic switching architectures in integrated MEMS devices, without incurring excessive energy consumption. This article reviews the status of magnetic MEMS technology and presents devices recently developed by various research groups, with key focuses on integrability and effective power management, in addition to the ability to integrate the technology with other microelectronic fabrication processes.

  9. Robust sliding-mode control of a MEMS optical switch

    Energy Technology Data Exchange (ETDEWEB)

    Ebrahimi, Behrouz; Bahrami, Mohsen [Mechanical Engineering Department, Amirkabir University of Technology, 434 Hafez Ave., Tehran 15, Iran Aerospace Research Institute, Tehran (Iran, Islamic Republic of)

    2006-04-01

    Over the last few years interests have emerged for application of MEMS in telecommunications. The use of MEMS for optical switching has turned to be the most attractive since this application could revolutionize fiber optic telecommunications. In this paper a robust control strategy based on sliding-mode control theory is developed for a MEMS optical switch, considering electrical, mechanical, and optical models. Sliding-mode control enables compact realization of a robust controller tolerant of device characteristics variation, non-linearties, and types of inherent instabilities. Robustness of proposed control scheme against disturbances is proved by Lyapunov second method and demonstrated through simulations. In addition, the presented control scheme is simple to implement in practical application.

  10. MEMS-Based Communications Systems for Space-Based Applications

    Science.gov (United States)

    DeLosSantos, Hector J.; Brunner, Robert A.; Lam, Juan F.; Hackett, Le Roy H.; Lohr, Ross F., Jr.; Larson, Lawrence E.; Loo, Robert Y.; Matloubian, Mehran; Tangonan, Gregory L.

    1995-01-01

    As user demand for higher capacity and flexibility in communications satellites increases, new ways to cope with the inherent limitations posed by the prohibitive mass and power consumption, needed to satisfy those requirements, are under investigation. Recent studies suggest that while new satellite architectures are necessary to enable multi-user, multi-data rate, multi-location satellite links, these new architectures will inevitably increase power consumption, and in turn, spacecraft mass, to such an extent that their successful implementation will demand novel lightweight/low power hardware approaches. In this paper, following a brief introduction to the fundamentals of communications satellites, we address the impact of micro-electro-mechanical systems (MEMS) technology, in particular micro-electro-mechanical (MEM) switches to mitigate the above mentioned problems and show that low-loss/wide bandwidth MEM switches will go a long way towards enabling higher capacity and flexibility space-based communications systems.

  11. Modelling of damping forces occuring in simple MEMS systems

    Directory of Open Access Journals (Sweden)

    Kamil Urbanowicz

    2015-12-01

    Full Text Available A certain damping force occurs in the micro-mechanical systems referred as MEMS. At the design stage of such systems, these forces must be accurately estimated. As shown in this work, in all systems operating at low frequencies, most important force is the one associated with the flotation of air film from the volume between two parallel operating movable MEMS plates. This force can be accurately estimated by analytical methods known from the literature. The paper presents analytical solutions that are frequently used in practice for simple plates. Also some simple simulations, using all described analytical solutions compared with the results of specialized program called Comsol Multyphysics, are shown. Presented research demonstrate the effectiveness of numerical software.[b]Keywords[/b]: MEMS, damping forces, Reynolds equation, modelling, simulation

  12. MEMS inertial sensors for load monitoring of wind turbine blades

    Science.gov (United States)

    Cooperman, Aubryn M.; Martinez, Marcias J.

    2015-03-01

    Structural load monitoring of wind turbines is becoming increasingly important due increasing turbine size and offshore deployment. Rotor blades are key components that can be monitored by continuously measuring their deflection and thereby determining strain and loads on the blades. In this paper, a method is investigated for monitoring blade deformation that utilizes micro-electromechanical systems (MEMS) comprising triaxial accelerometers, magnetometers and gyroscopes. This approach is demonstrated using a cantilever beam instrumented with 5 MEMS and 4 strain gauges. The measured changes in angles obtained from the MEMS are used to determine a deformation surface which is used as an input to a finite element model in order to estimate the strain throughout the beam. The results are then verified by comparison with strain gauge measurements.

  13. Tympanic-ossicular prostheses and MEMS technology: whats and whys.

    Science.gov (United States)

    Urquiza, Rafael; López, Javier; Gonzalez-Herrera, Antonio; Povedano, Valerio; Ciges, Miguel

    2009-04-01

    Microelectromechanical systems (MEMS) technology fulfils the requirements of implantable middle ear devices and consequently it becomes an excellent option to design and develop the related transducers. To present a summarized overview of the fundamentals of mechanical technologies in relation to middle ear implants research. Analysis of the possibilities, limitations and practical applications of MEMS as regards the research, development, transference and fabrication processes. MEMS is a new technology with the potential to develop small integrated mechanical and electronic systems that share many processes of integrated circuits technology and its wide application potential. Middle ear prostheses are essentially special implantable transducers that mimic the properties of the tympano-ossicular system: electromechanical systems that deliver low energy pulses safely and efficiently into the labyrinth fluids. They primarily require: active mechanisms to preclude potential damage levels; minimum energy consumption; adequate dimensions for the middle ear; and biotolerable materials. Additionally, development and translational aspects of the selected technology are of utmost importance in this field.

  14. Predicting fracture in micron-scale polycrystalline silicon MEMS structures.

    Energy Technology Data Exchange (ETDEWEB)

    Hazra, Siddharth S. (Carnegie Mellon University, Pittsburgh, PA); de Boer, Maarten Pieter (Carnegie Mellon University, Pittsburgh, PA); Boyce, Brad Lee; Ohlhausen, James Anthony; Foulk, James W., III; Reedy, Earl David, Jr.

    2010-09-01

    Designing reliable MEMS structures presents numerous challenges. Polycrystalline silicon fractures in a brittle manner with considerable variability in measured strength. Furthermore, it is not clear how to use a measured tensile strength distribution to predict the strength of a complex MEMS structure. To address such issues, two recently developed high throughput MEMS tensile test techniques have been used to measure strength distribution tails. The measured tensile strength distributions enable the definition of a threshold strength as well as an inferred maximum flaw size. The nature of strength-controlling flaws has been identified and sources of the observed variation in strength investigated. A double edge-notched specimen geometry was also tested to study the effect of a severe, micron-scale stress concentration on the measured strength distribution. Strength-based, Weibull-based, and fracture mechanics-based failure analyses were performed and compared with the experimental results.

  15. Piezoresistive Sensors Development Using Monolithic CMOS MEMS Technology

    Directory of Open Access Journals (Sweden)

    A. Chaehoi

    2011-04-01

    Full Text Available This paper presents the development of a monolithic CMOS-MEMS platform under the iDesign and SemeMEMS projects with the aim of jointly providing an open access “one-stop-shop” design and prototyping facility for integrated CMOS-MEMS. This work addresses the implementation of a 3-axis accelerometer and a pressure sensor using Semefab’s in-house 2-poly 1-metal CMOS process on a 380/4/15 μm SOI wafer; the membrane and the proof mass being micromachined using double-sided Deep Reactive Ion Etching (DRIE. This monolithic approach promises, in high volume production and using low complexity processes, a dramatic cost reduction over hybrid sensors. Furthermore, the embedded signal conditioning and the low-noise level in polysilicon gauges enables high performance to be achieved by implementing dedicated on-chip amplification and filtering circuitry.

  16. Design of RF MEMS switches without pull-in instability

    Science.gov (United States)

    Proctor, W. Cyrus; Richards, Gregory P.; Shen, Chongyi; Skorczewski, Tyler; Wang, Min; Zhang, Jingyan; Zhong, Peng; Massad, Jordan E.; Smith, Ralph

    2010-04-01

    Micro-electro-mechanical systems (MEMS) switches for radio-frequency (RF) signals have certain advantages over solid-state switches, such as lower insertion loss, higher isolation, and lower static power dissipation. Mechanical dynamics can be a determining factor for the reliability of RF MEMS. The RF MEMS ohmic switch discussed in this paper consists of a plate suspended over an actuation pad by four double-cantilever springs. Closing the switch with a simple step actuation voltage typically causes the plate to rebound from its electrical contacts. The rebound interrupts the signal continuity and degrades the performance, reliability and durability of the switch. The switching dynamics are complicated by a nonlinear, electrostatic pull-in instability that causes high accelerations. Slow actuation and tailored voltage control signals can mitigate switch bouncing and effects of the pull-in instability; however, slow switching speed and overly-complex input signals can significantly penalize overall system-level performance. Examination of a balanced and optimized alternative switching solution is sought. A step toward one solution is to consider a pull-in-free switch design. In this paper, determine how simple RC-circuit drive signals and particular structural properties influence the mechanical dynamics of an RF MEMS switch designed without a pull-in instability. The approach is to develop a validated modeling capability and subsequently study switch behavior for variable drive signals and switch design parameters. In support of project development, specifiable design parameters and constraints will be provided. Moreover, transient data of RF MEMS switches from laser Doppler velocimetry will be provided for model validation tasks. Analysis showed that a RF MEMS switch could feasibly be designed with a single pulse waveform and no pull-in instability and achieve comparable results to previous waveform designs. The switch design could reliably close in a timely

  17. RF MEMS Fractal Capacitors With High Self-Resonant Frequencies

    KAUST Repository

    Elshurafa, Amro M.

    2012-07-23

    This letter demonstrates RF microelectromechanical systems (MEMS) fractal capacitors possessing the highest reported self-resonant frequencies (SRFs) in PolyMUMPS to date. Explicitly, measurement results show SRFs beyond 20 GHz. Furthermore, quality factors higher than 4 throughout a band of 1-15 GHz and reaching as high as 28 were achieved. Additional benefits that are readily attainable from implementing fractal capacitors in MEMS are discussed, including suppressing residual stress warping, eliminating the need for etching holes, and reducing parasitics. The latter benefits were acquired without any fabrication intervention. © 2011 IEEE.

  18. An Electromagnetic MEMS Energy Harvester Array with Multiple Vibration Modes

    Directory of Open Access Journals (Sweden)

    Huicong Liu

    2015-07-01

    Full Text Available This paper reports the design, micromachining and characterization of an array of electromagnetic energy harvesters (EHs with multiple frequency peaks. The authors present the combination of three multi-modal spring-mass structures so as to realize at least nine resonant peaks within a single microelectromechanical systems (MEMS chip. It is assembled with permanent magnet to show an electromagnetic-based energy harvesting capability. This is the first demonstration of multi-frequency MEMS EH existing with more than three resonant peaks within a limited frequency range of 189 to 662 Hz. It provides a more effective approach to harvest energy from the vibration sources of multiple frequency peaks.

  19. Poly-SiGe-based MEMS Xylophone Bar Magnetometer

    OpenAIRE

    Rochus, Véronique; Jansen, R.; Tilmans, H. A. C.; Rottenberg, X.; Chen, C.; Ranvier, S.; Lamy, Hervé; Rochus, Pierre

    2012-01-01

    This paper presents the design, fabrication and preliminary characterization of highly sensitive MEMS-based Xylophone Bar Magnetometers (XBMs) realized in imec’s poly-SiGe MEMS technology. Key for our Lorentz force driven capacitively sensed resonant sensor are the combination of reasonably high Q-factor and conductivity of imec’s poly-SiGe, our optimized multiphysics sensor design targeting the maximization of the Q-factor in a wide temperature range as well as our proprietary monolithic abo...

  20. Additive direct-write microfabrication for MEMS: A review

    Science.gov (United States)

    Teh, Kwok Siong

    2017-12-01

    Direct-write additive manufacturing refers to a rich and growing repertoire of well-established fabrication techniques that builds solid objects directly from computer- generated solid models without elaborate intermediate fabrication steps. At the macroscale, direct-write techniques such as stereolithography, selective laser sintering, fused deposition modeling ink-jet printing, and laminated object manufacturing have significantly reduced concept-to-product lead time, enabled complex geometries, and importantly, has led to the renaissance in fabrication known as the maker movement. The technological premises of all direct-write additive manufacturing are identical—converting computer generated three-dimensional models into layers of two-dimensional planes or slices, which are then reconstructed sequentially into threedimensional solid objects in a layer-by-layer format. The key differences between the various additive manufacturing techniques are the means of creating the finished layers and the ancillary processes that accompany them. While still at its infancy, direct-write additive manufacturing techniques at the microscale have the potential to significantly lower the barrier-of-entry—in terms of cost, time and training—for the prototyping and fabrication of MEMS parts that have larger dimensions, high aspect ratios, and complex shapes. In recent years, significant advancements in materials chemistry, laser technology, heat and fluid modeling, and control systems have enabled additive manufacturing to achieve higher resolutions at the micrometer and nanometer length scales to be a viable technology for MEMS fabrication. Compared to traditional MEMS processes that rely heavily on expensive equipment and time-consuming steps, direct-write additive manufacturing techniques allow for rapid design-to-prototype realization by limiting or circumventing the need for cleanrooms, photolithography and extensive training. With current direct-write additive

  1. APPLICATION OF MEMS TECHNOLOGY TO MICRO DIRECT METHANOL FUEL CELL

    OpenAIRE

    Liu, Xiaowei; Suo, Chunguang; Zhang, Yufeng; Zhang, Haifeng; Dhum, Ch.; Chen, Weiping; Lu, Xuebin

    2006-01-01

    Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/5920); International audience; In view of micro fuel cells, the silicon processes are employed for microfabrication of the micro direct methanol fuel cell (µDMFC). Using the MEMS technology we have successfully made single µDMFC as small as 10mm×8mm×3mm. The main reason for the use of MEMS processes is the prospective potential for miniaturization and economical mass production of small fuel cells. The doub...

  2. Widely tunable telecom MEMS-VCSEL for terahertz photomixing.

    Science.gov (United States)

    Haidar, Mohammad Tanvir; Preu, Sascha; Paul, Sujoy; Gierl, Christian; Cesar, Julijan; Emsia, Ali; Küppers, Franko

    2015-10-01

    We report frequency-tunable terahertz (THz) generation with a photomixer driven by an ultra-broadband tunable micro-electro-mechanical system vertical-cavity surface-emitting laser (MEMS-VCSEL) and a fixed-wavelength VCSEL, as well as a tunable MEMS-VCSEL mixed with a distributed feedback (DFB) diode. A total frequency span of 3.4 THz is covered in direct detection mode and 3.23 THz in the homodyne mode. The tuning range is solely limited by the dynamic range of the photomixers and the Schottky diode/photoconductor used in the experiment.

  3. Memória e Pastiche em Leite Derramado

    Directory of Open Access Journals (Sweden)

    Mírian Sumica Carneiro Reis

    2016-07-01

    Full Text Available Neste artigo, propomos uma análise do romance Leite Derramado, de Chico Buarque, considerando que, em sua tessitura, a memória é tema e trabalho de citação, a partir dos quais ecoam as vozes de outros autores, textos, teorias, mas também da ruptura com a historiografia tradicional e da derrocada de valores e ideologias para as quais nem o aspecto de criação da memória pode representar redenção.

  4. Design, modeling, and simulation of MEMS pressure sensors

    Science.gov (United States)

    Geca, Mateusz; Kociubiński, Andrzej

    2013-10-01

    This paper focuses on the design and analysis of a MEMS piezoresistive pressure sensor. The absolute pressure sensor with a 150μm wide and 3μm thick silicon membrane is modeled and simulated using CoventorWare™ softwareprofiting from a finite element method (FEM) implemented to determine specific electro-mechanical parameter values characterizing MEMS structure being designed. Optimization of piezoresistor parameters has been also performed to determine optimum dimensions of piezoresistors and their location referred to the center on the pressure sensor diaphragm. The output voltage measured on a piezoresistive Wheatstone bridge has been obtained and compared for two different resistor materials along with and linearity error analysis.

  5. Additive direct-write microfabrication for MEMS: A review

    Science.gov (United States)

    Teh, Kwok Siong

    2017-10-01

    Direct-write additive manufacturing refers to a rich and growing repertoire of well-established fabrication techniques that builds solid objects directly from computer- generated solid models without elaborate intermediate fabrication steps. At the macroscale, direct-write techniques such as stereolithography, selective laser sintering, fused deposition modeling ink-jet printing, and laminated object manufacturing have significantly reduced conceptto- product lead time, enabled complex geometries, and importantly, has led to the renaissance in fabrication known as the maker movement. The technological premises of all direct-write additive manufacturing are identical—converting computer generated three-dimensional models into layers of two-dimensional planes or slices, which are then reconstructed sequentially into threedimensional solid objects in a layer-by-layer format. The key differences between the various additive manufacturing techniques are the means of creating the finished layers and the ancillary processes that accompany them. While still at its infancy, direct-write additive manufacturing techniques at the microscale have the potential to significantly lower the barrier-of-entry—in terms of cost, time and training—for the prototyping and fabrication of MEMS parts that have larger dimensions, high aspect ratios, and complex shapes. In recent years, significant advancements in materials chemistry, laser technology, heat and fluid modeling, and control systems have enabled additive manufacturing to achieve higher resolutions at the micrometer and nanometer length scales to be a viable technology for MEMS fabrication. Compared to traditional MEMS processes that rely heavily on expensive equipment and time-consuming steps, direct-write additive manufacturing techniques allow for rapid design-toprototype realization by limiting or circumventing the need for cleanrooms, photolithography and extensive training. With current direct-write additive

  6. Thermal energy harvesting for application at MEMS scale

    CERN Document Server

    Percy, Steven; McGarry, Scott; Post, Alex; Moore, Tim; Cavanagh, Kate

    2014-01-01

    This book discusses the history of thermal heat generators and focuses on the potential for these processes using micro-electrical mechanical systems (MEMS) technology for this application. The main focus is on the capture of waste thermal energy for example from industrial processes, transport systems or the human body to generate useable electrical power.  A wide range of technologies is discussed, including external combustion heat cycles at MEMS ( Brayton, Stirling and Rankine), Thermoacoustic, Shape Memory Alloys (SMAs), Multiferroics, Thermionics, Pyroelectric, Seebeck, Alkali Metal Thermal, Hydride Heat Engine, Johnson Thermo Electrochemical Converters, and the Johnson Electric Heat Pipe.

  7. Progress on MEMS-scanned ladar

    Science.gov (United States)

    Stann, Barry L.; Dammann, John F.; Giza, Mark M.

    2016-05-01

    The Army Research Laboratory (ARL) has continued to research a short-range ladar imager for use on small unmanned ground vehicles (UGV) and recently small unmanned air vehicles (UAV). The current ladar brassboard is based on a micro-electro-mechanical system (MEMS) mirror coupled to a low-cost pulsed erbium fiber laser. It has a 5-6 Hz frame rate, an image size of 256 (h) x 128 (v) pixels, a 42º x 21º field of regard, 35 m range, eyesafe operation, and 40 cm range resolution with provisions for super-resolution. Experience with driving experiments on small ground robots and efforts to extend the use of the ladar to UAV applications has encouraged work to improve the ladar's performance. The data acquisition system can now capture range data from the three return pulses in a pixel (that is first, last, and largest return), and information such as elapsed time, operating parameters, and data from an inertial navigation system. We will mention the addition and performance of subsystems to obtain eye-safety certification. To meet the enhanced range requirement for the UAV application, we describe a new receiver circuit that improves the signal-to-noise (SNR) several-fold over the existing design. Complementing this work, we discuss research to build a low-capacitance large area detector that may enable even further improvement in receiver SNR. Finally, we outline progress to build a breadboard ladar to demonstrate increased range to 160 m. If successful, this ladar will be integrated with a color camera and inertial navigation system to build a data collection package to determine imaging performance for a small UAV.

  8. Applications and requirements for MEMS scanner mirrors

    Science.gov (United States)

    Wolter, Alexander; Hsu, Shu-Ting; Schenk, Harald; Lakner, Hubert K.

    2005-01-01

    Micro scanning mirrors are quite versatile MEMS devices for the deflection of a laser beam or a shaped beam from another light source. The most exciting application is certainly in laser-scanned displays. Laser television, home cinema and data projectors will display the most brilliant colors exceeding even plasma, OLED and CRT. Devices for front and rear projection will have advantages in size, weight and price. These advantages will be even more important in near-eye virtual displays like head-mounted displays or viewfinders in digital cameras and potentially in UMTS handsets. Optical pattern generation by scanning a modulated beam over an area can be used also in a number of other applications: laser printers, direct writing of photo resist for printed circuit boards or laser marking and with higher laser power laser ablation or material processing. Scanning a continuous laser beam over a printed pattern and analyzing the scattered reflection is the principle of barcode reading in 1D and 2D. This principle works also for identification of signatures, coins, bank notes, vehicles and other objects. With a focused white-light or RGB beam even full color imaging with high resolution is possible from an amazingly small device. The form factor is also very interesting for the application in endoscopes. Further applications are light curtains for intrusion control and the generation of arbitrary line patterns for triangulation. Scanning a measurement beam extends point measurements to 1D or 2D scans. Automotive LIDAR (laser RADAR) or scanning confocal microscopy are just two examples. Last but not least there is the field of beam steering. E.g. for all-optical fiber switches or positioning of read-/write heads in optical storage devices. The variety of possible applications also brings a variety of specifications. This publication discusses various applications and their requirements.

  9. MEMS and MOEMS for national security applications

    Science.gov (United States)

    Scott, Marion W.

    2003-01-01

    Major opportunities for microsystem insertion into commercial applications, such as telecommunications and medical prosthesis, are well known. Less well known are applications that ensure the security of our nation, the protection of its armed forces, and the safety of its citizens. Microsystems enable entirely new possibilities to meet National Security needs, which can be classed along three lines: anticipating security needs and threats, deterring the efficacy of identified threats, and defending against the application of these threats. In each of these areas, specific products that are enabled by MEMS and MOEMS are discussed. In the area of anticipating needs and threats, sensored microsystems designed for chem/bio/nuclear threats, and sensors for border and asset protection can significantly secure our borders, ports, and transportation systems. Key features for these applications include adaptive optics and spectroscopic capabilities. Microsystems to monitor soil and water quality can be used to secure critical infrastructure, food safety can be improved by in-situ identification of pathogens, and sensored buildings can ensure the architectural safety of our homes and workplaces. A challenge to commercializing these opportunities, and thus making them available for National Security needs, is developing predictable markets and predictable technology roadmaps. The integrated circuit manufacturing industry provides an example of predictable technology maturation and market insertion, primarily due to the existence of a "unit cell" that allows volume manufacturing. It is not clear that microsystems can follow an analogous path. The possible paths to affordable low-volume production, as well as the prospects of a microsystems unit cell, are discussed.

  10. Thermoelectrical Generator for a MEMS-Fuze

    Directory of Open Access Journals (Sweden)

    A. K. Efremov

    2015-01-01

    Full Text Available The structure of modern fuzes includes micro-electromechanical systems (MEMS, which have such advanced devices as micro-accelerometers and micro-switches, being triggered at a specified level of setback. Independent power source (PS, as an inherent part of the MEMSfuze, charges an energy storage unit during the shot and triggers the fuze firing circuit when the shell encounters the target. Operating level of the control signal should be achieved within the time of remote arming, determined by the type of ammunition. The paper considers a possibility to develop PS as a thermoelectric generator (TEG with aerodynamic heating of hot junctions due to friction of the projectile body on the incoming airflow. The initial temperature is determined by the driving band cutting into the rifling and friction during the movement of projectile through the tube bore. The paper presents a technique for calculating the temperature field along the body of the projectile from the critical point, located at the top of the shell head. The solution of the equation of heat balance reveals the temporal development of the projectile body temperature. The proposed mathematical model of the TEG describes the process of converting heat into electrical output signal (thermo-EMF. An example of calculation for a specific artillery system – 57-mm anti-aircraft gun S-60 is given. Calculation of the TEG output signal was limited by the time, which is necessary to reach the top of the projectile trajectory. It is shown that at high altitude the temperature difference may drop to zero, thus cutting off the TEG output signal. Selection of capacitive storage parameters can be based on the reliability test conditions of the fuze firing circuit actuators, taking into account the partial storage discharge on the trajectory before the projectile encounters the target.

  11. Transplantation tool integrated with MEMS manipulator for retinal pigment epithelium cell sheet.

    Science.gov (United States)

    Wada, H; Konishi, S

    2013-01-01

    This paper reports a transplantation tool for the retinal pigment epithelium in an eye. We have developed MEMS manipulator as an end-effector for transplantation of retinal pigment epithelium cell sheet. Typical size of MEMS manipulator is 3mm×3mm. MEMS manipulator was made of polydimethylsiloxane and driven by pneumatic balloon actuators. MEMS manipulator have been improved and integrated with several functions by sensors and actuators. MEMS manipulator is integrated into a transplantation tool. A whole tool also requires improvements based on our experimental results. We have improved our tool in terms of assembling, sealing, and operation.

  12. Appearance of a Moore's law in MEMS? Trends affecting the MNT supply chain

    Science.gov (United States)

    van Heeren, Henne

    2006-04-01

    This presentation will address some of the latest market and technology developments for components using MST/MEMS such as portable consumer products, data storage devices etc. The impacts of these developments on the supply chain for MST/MEMS will be discussed. A MST/MEMS mantra is "there is no Moore's law in MEMS". This presentation will demonstrate that elements of MEMS roadmaps are appearing. Although the MEMS industry is highly diverse, sometimes trends can be identified which affect the industry as a whole. To identify and understand these trends is of the utmost importance for the service and equipment suppliers in the MNT/MEMS supply chain. These facilities have to invest in new technologies to be able to sustain their competitive position.

  13. Piezoelectric polymer gated OFET: Cutting-edge electro-mechanical transducer for organic MEMS-based sensors

    OpenAIRE

    Damien Thuau; Mamatimin Abbas; Guillaume Wantz; Lionel Hirsch; Isabelle Dufour; Cédric Ayela

    2016-01-01

    The growth of micro electro-mechanical system (MEMS) based sensors on the electronic market is forecast to be invigorated soon by the development of a new branch of MEMS-based sensors made of organic materials. Organic MEMS have the potential to revolutionize sensor products due to their light weight, low-cost and mechanical flexibility. However, their sensitivity and stability in comparison to inorganic MEMS-based sensors have been the major concerns. In the present work, an organic MEMS sen...

  14. Efficacy of MEM 1003, a novel calcium channel blocker, in delay and trace eyeblink conditioning in older rabbits.

    Science.gov (United States)

    Rose, Gregory M; Ong, Voon S; Woodruff-Pak, Diana S

    2007-05-01

    Eyeblink conditioning is a relatively simple form of associative learning that shows neurobiological and behavioral parallels across several species, including humans. Aged subjects acquire eyeblink conditioning more slowly than young ones. In addition, eyeblink conditioning effectively discriminates patients with Alzheimer's disease from healthy older adults. The present study evaluated the effect of a novel L-type Ca2+ channel antagonist, MEM 1003, on delay and trace eyeblink conditioning in older (mean 33.4 months old) female New Zealand white rabbits. In the delay conditioning paradigm, an 850 ms tone conditioning stimulus (CS) was followed 750 ms after its onset by a 100 ms corneal air puff. Several trace conditioning paradigms were evaluated, with a silent period of 300, 400 or 500 ms between the end of the tone CS and the delivery of the air puff. Learning was more difficult in the longer trace paradigms than in the delay paradigm. MEM 1003, at a dose of 2.0 mg/kg, s.c., given daily 30 min prior to training on each of the 15 training days, enhanced learning compared to vehicle injections in both delay and trace paradigms. However, higher or lower doses were ineffective. These results support previous work demonstrating that modulation of Ca2+ channel activity can reduce age-related cognitive impairments.

  15. Integrated MEMS-based IQ intelligent tire applications

    Science.gov (United States)

    Dunn, William F.

    1999-07-01

    The Goodyear Tire & Rubber Company is evaluating the use of integrated MEMS (MicroElectroMechanical Systems) for tire pressure sensing applications in automotive, bus, truck, aircraft and military tire lines. This paper deals with the reasons for this and the vision we have of how this will be implemented.

  16. Adaptive Sliding Mode Control of MEMS AC Voltage Reference Source

    Directory of Open Access Journals (Sweden)

    Ehsan Ranjbar

    2017-01-01

    Full Text Available The accuracy of physical parameters of a tunable MEMS capacitor, as the major part of MEMS AC voltage reference, is of great importance to achieve an accurate output voltage free of the malfunctioning noise and disturbance. Even though strenuous endeavors are made to fabricate MEMS tunable capacitors with desiderated accurate physical characteristics and ameliorate exactness of physical parameters’ values, parametric uncertainties ineluctably emerge in fabrication process attributable to imperfections in micromachining process. First off, this paper considers applying an adaptive sliding mode controller design in the MEMS AC voltage reference source so that it is capable of giving off a well-regulated output voltage in defiance of jumbling parametric uncertainties in the plant dynamics and also aggravating external disturbance imposed on the system. Secondly, it puts an investigatory comparison with the designed model reference adaptive controller and the pole-placement state feedback one into one’s prospective. Not only does the tuned adaptive sliding mode controller show remarkable robustness against slow parameter variation and external disturbance being compared to the pole-placement state feedback one, but also it immensely gets robust against the external disturbance in comparison with the conventional adaptive controller. The simulation results are promising.

  17. Split-resonator integrated-post MEMS gyroscope

    Science.gov (United States)

    Bae, Youngsam (Inventor); Hayworth, Ken J. (Inventor); Shcheglov, Kirill V. (Inventor)

    2004-01-01

    A split-resonator integrated-post vibratory microgyroscope may be fabricated using micro electrical mechanical systems (MEMS) fabrication techniques. The microgyroscope may include two gyroscope sections bonded together, each gyroscope section including resonator petals, electrodes, and an integrated half post. The half posts are aligned and bonded to act as a single post.

  18. Noise Reduction for a MEMS-Gyroscope-Based Head Mouse.

    Science.gov (United States)

    Du, Jiaying; Gerdtman, Christer; Lindén, Maria

    2015-01-01

    In this paper, four different signal processing algorithms which can be applied to reduce the noise from a MEMS-gyroscope-based computer head mouse are presented. MEMS-gyroscopes are small, light, cheap and widely used in many electrical products. MultiPos, a MEMS-gyroscope-based computer head mouse system was designed for persons with movement disorders. Noise such as physiological tremor and electrical noise is a common problem for the MultiPos system. In this study four different signal processing algorithms were applied and evaluated by simulation in MATLAB and implementation in a dsPIC, with aim to minimize the noise in MultiPos. The algorithms were low-pass filter, Least Mean Square (LMS) algorithm, Kalman filter and Weighted Fourier Linear Combiner (WFLC) algorithm. Comparisons and system tests show that these signal processing algorithms can be used to improve the MultiPos system. The WFLC algorithm was found the best method for noise reduction in the application of a MEMS-gyroscope-based head mouse.

  19. Stress Analysis of SiC MEMS Using Raman Spectroscopy

    Science.gov (United States)

    Ness, Stanley J.; Marciniak, M. A.; Lott, J. A.; Starman, L. A.; Busbee, J. D.; Melzak, J. M.

    2003-03-01

    During the fabrication of Micro-Electro-Mechanical Systems (MEMS), residual stress is often induced in the thin films that are deposited to create these systems. These stresses can cause the device to fail due to buckling, curling, or fracture. Industry is looking for ways to characterize the stress during the deposition of thin films in order to reduce or eliminate device failure. Micro-Raman spectroscopy has been successfully used to characterize poly-Si MEMS devices made with the MUMPS® process. Raman spectroscopy was selected because it is nondestructive, fast and has the potential for in situ stress monitoring. This research attempts to use Raman spectroscopy to analyze the stress in SiC MEMS made with the MUSiC® process. Raman spectroscopy is performed on 1-2-micron-thick SiC thin films deposited on silicon, silicon nitride, and silicon oxide substrates. The most common poly-type of SiC found in thin film MEMS made with the MUSiC® process is 3C-SiC. Research also includes baseline spectra of 6H, 4H, and 15R poly-types of bulk SiC.

  20. An Integrated MEMS Gyroscope Array with Higher Accuracy Output

    Science.gov (United States)

    Chang, Honglong; Xue, Liang; Qin, Wei; Yuan, Guangmin; Yuan, Weizheng

    2008-01-01

    In this paper, an integrated MEMS gyroscope array method composed of two levels of optimal filtering was designed to improve the accuracy of gyroscopes. In the first-level filtering, several identical gyroscopes were combined through Kalman filtering into a single effective device, whose performance could surpass that of any individual sensor. The key of the performance improving lies in the optimal estimation of the random noise sources such as rate random walk and angular random walk for compensating the measurement values. Especially, the cross correlation between the noises from different gyroscopes of the same type was used to establish the system noise covariance matrix and the measurement noise covariance matrix for Kalman filtering to improve the performance further. Secondly, an integrated Kalman filter with six states was designed to further improve the accuracy with the aid of external sensors such as magnetometers and accelerometers in attitude determination. Experiments showed that three gyroscopes with a bias drift of 35 degree per hour could be combined into a virtual gyroscope with a drift of 1.07 degree per hour through the first-level filter, and the bias drift was reduced to 0.53 degree per hour after the second-level filtering. It proved that the proposed integrated MEMS gyroscope array is capable of improving the accuracy of the MEMS gyroscopes, which provides the possibility of using these low cost MEMS sensors in high-accuracy application areas. PMID:27879855

  1. A MEMS Energy Harvesting Device for Vibration with Low Acceleration

    DEFF Research Database (Denmark)

    Triches, Marco; Wang, Fei; Crovetto, Andrea

    2012-01-01

    We propose a polymer electret based energy harvesting device in order to extract energy from vibration sources with low acceleration. With MEMS technology, a silicon structure is fabricated which can resonate in 2D directions. Thanks to the excellent mechanical properties of the silicon material...

  2. MEMS Accelerometer with Screen Printed Piezoelectric Thick Film

    DEFF Research Database (Denmark)

    Hindrichsen, Christian Carstensen; Lau-Moeller, R.; Bove, T.

    2006-01-01

    A bulk-micromachined piezoelectric MEMS accelerometer with screen printed piezoelectric Pb(ZrxTil )O3(PZT) thick film (TF) as the sensing material has been fabricated and characterized. The accelerometer has a four beam structure with a central seismic mass (3600x3600x500 pm3) and a total chip size...

  3. Modeling and non-linear responses of MEMS capacitive accelerometer

    Directory of Open Access Journals (Sweden)

    Sri Harsha C.

    2014-01-01

    Full Text Available A theoretical investigation of an electrically actuated beam has been illustrated when the electrostatic-ally actuated micro-cantilever beam is separated from the electrode by a moderately large gap for two distinct types of geometric configurations of MEMS accelerometer. Higher order nonlinear terms have been taken into account for studying the pull in voltage analysis. A nonlinear model of gas film squeezing damping, another source of nonlinearity in MEMS devices is included in obtaining the dynamic responses. Moreover, in the present work, the possible source of nonlinearities while formulating the mathematical model of a MEMS accelerometer and their influences on the dynamic responses have been investigated. The theoretical results obtained by using MATLAB has been verified with the results obtained in FE software and has been found in good agreement. Criterion towards stable micro size accelerometer for each configuration has been investigated. This investigation clearly provides an understanding of nonlinear static and dynamics characteristics of electrostatically micro cantilever based device in MEMS.

  4. A single-mask thermal displacement sensor in MEMS

    NARCIS (Netherlands)

    Krijnen, B.; Krijnen, B.; Hogervorst, R.P.; van Dijk, J.W.; Engelen, Johannes Bernardus Charles; Woldering, L.A.; Brouwer, Dannis Michel; Abelmann, Leon; Soemers, Herman

    2011-01-01

    This work presents a MEMS displacement sensor based on the conductive heat transfer of a resistively heated silicon structure towards an actuated stage parallel to the structure. This differential sensor can be easily incorporated into a silicon-on-insulator-based process, and fabricated within the

  5. A single-mask thermal displacement sensor in MEMS

    NARCIS (Netherlands)

    Hogervorst, R.P.; Krijnen, B.; Krijnen, B.; Brouwer, Dannis Michel; Engelen, Johannes Bernardus Charles; Staufer, U.

    Position sensing in MEMS is often based on the principle of varying capacitance [1]. Alternative position sensing principles include using integrated optical waveguides [2] or varying thermal conductance [3]. Lantz et al demonstrated a thermal displacement sensor achieving nanometre resolution on a

  6. Review of ?Introduction to BioMEMS? by Albert Folch

    OpenAIRE

    Kubby, Joel A

    2013-01-01

    Abstract This article is a review of the book “Introduction to BioMEMS” by Albert Folch which is published by CRC Press, Taylor & Francis Group. It will review the contents of the book and discuss it suitability as textbook, highlights of the book, and comparison to other textbooks on BioMEMS.

  7. A MEMS Condenser Microphone-Based Intracochlear Acoustic Receiver.

    Science.gov (United States)

    Pfiffner, Flurin; Prochazka, Lukas; Peus, Dominik; Dobrev, Ivo; Dalbert, Adrian; Sim, Jae Hoon; Kesterke, Rahel; Walraevens, Joris; Harris, Francesca; Roosli, Christof; Obrist, Dominik; Huber, Alexander

    2017-10-01

    Intracochlear sound pressure (ICSP) measurements are limited by the small dimensions of the human inner ear and the requirements imposed by the liquid medium. A robust intracochlear acoustic receiver (ICAR) for repeated use with a simple data acquisition system that provides the required high sensitivity and small dimensions does not yet exist. The work described in this report aims to fill this gap and presents a new microelectromechanical systems (MEMS) condenser microphone (CMIC)-based ICAR concept suitable for ICSP measurements in human temporal bones. The ICAR head consisted of a passive protective diaphragm (PD) sealing the MEMS CMIC against the liquid medium, enabling insertion into the inner ear. The components of the MEMS CMIC-based ICAR were expressed by a lumped element model (LEM) and compared to the performance of successfully fabricated ICARs. Good agreement was achieved between the LEM and the measurements with different sizes of the PD. The ICSP measurements in a human cadaver temporal bone yielded data in agreement with the literature. Our results confirm that the presented MEMS CMIC-based ICAR is a promising technology for measuring ICSP in human temporal bones in the audible frequency range. A sensor for evaluation of the biomechanical hearing process by quantification of ICSP is presented. The concept has potential as an acoustic receiver in totally implantable cochlear implants.

  8. Materials analysis of fluorocarbon films for MEMS applications

    NARCIS (Netherlands)

    Elders, J.; Jansen, Henricus V.; Elwenspoek, Michael Curt

    1994-01-01

    In this paper the results of the materials analysis of fluorocarbon (FC) films are presented. The properties of the fluorocarbon films are comparable to those of polytetrafluoroethylene (PTFE), better known under the trademarks such as teflon and fluon. The properties of PTFE are desirable for MEMS

  9. Design of the MEMS Piezoresistive Electronic Heart Sound Sensor.

    Science.gov (United States)

    Zhang, Guojun; Liu, Mengran; Guo, Nan; Zhang, Wendong

    2016-11-07

    This paper proposes the electronic heart sound sensor, based on the piezoresistive principle and MEMS (Micro-Electro-Mechanical System) technology. Firstly, according to the characteristics of heart sound detection, the double-beam-block microstructure has been proposed, and the theoretical analysis and finite element method (FEM) simulation have been carried out. Combined with the natural frequency response of the heart sound (20~600 Hz), its structure sizes have been determined. Secondly, the processing technology of the microstructure with the stress concentration grooves has been developed. The material and sizes of the package have been determined by the three-layer medium transmission principle. Lastly, the MEMS piezoresistive electronic heart sound sensor has been tested compared with the 3200-type electronic stethoscope from 3M (São Paulo, MN, USA). The test results show that the heart sound waveform tested by the MEMS electronic heart sound sensor are almost the same as that tested by the 3200-type electronic stethoscope. Moreover, its signal-to-noise ratio is significantly higher. Compared with the traditional stethoscope, the MEMS heart sound sensor can provide the first and second heart sounds containing more abundant information about the lesion. Compared with the 3200-type electronic stethoscope from 3M, it has better performance and lower cost.

  10. Fast tunable blazed MEMS grating for external cavity lasers

    Science.gov (United States)

    Tormen, Maurizio; Niedermann, Philippe; Hoogerwerf, Arno; Shea, Herbert; Stanley, Ross

    2017-11-01

    Diffractive MEMS are interesting for a wide range of applications, including displays, scanners or switching elements. Their advantages are compactness, potentially high actuation speed and in the ability to deflect light at large angles. We have designed and fabricated deformable diffractive MEMS grating to be used as tuning elements for external cavity lasers. The resulting device is compact, has wide tunability and a high operating speed. The initial design is a planar grating where the beams are free-standing and attached to each other using leaf springs. Actuation is achieved through two electrostatic comb drives at either end of the grating. To prevent deformation of the free-standing grating, the device is 10 μm thick made from a Silicon on Insulator (SOI) wafer in a single mask process. At 100V a periodicity tuning of 3% has been measured. The first resonant mode of the grating is measured at 13.8 kHz, allowing high speed actuation. This combination of wide tunability and high operating speed represents state of the art in the domain of tunable MEMS filters. In order to improve diffraction efficiency and to expand the usable wavelength range, a blazed version of the deformable MEMS grating has been designed. A key issue is maintaining the mechanical properties of the original device while providing optically smooth blazed beams. Using a process based on anisotropic KOH etching, blazed gratings have been obtained and preliminary characterization is promising.

  11. An Evolutionary Approach for Robust Layout Synthesis of MEMS

    DEFF Research Database (Denmark)

    Fan, Zhun; Wang, Jiachuan; Goodman, Erik

    2005-01-01

    assumptions and treated with multiobjective genetic algorithm (MOGA), a special type of evolutionary computing approaches. Case study based on layout synthesis of a comb-driven MEM resonator shows that the approach proposed in this paper can lead to design results that meet the target performance and are less...

  12. Pulse Reversal PermAlloy Plating Process for MEMS Applications

    DEFF Research Database (Denmark)

    Smistrup, Kristian; Tang, Peter Torben; Møller, Per

    2007-01-01

    -stress deposits.We demonstrate selected MEMS applications of the electrolyte.The use of the strong complexing agent 5-sulfosalicylic acidallows for a photometric determination of the Fe3+-level in thebath and eliminate precipitates. This makes the electrolytesuitable as a Permalloy plating process used...

  13. Characterization of a MEMS Accelerometer for Inertial Navigating Applications

    Energy Technology Data Exchange (ETDEWEB)

    Kinney, R.D.

    1999-02-12

    Inertial MEMS sensors such as accelerometers and angular rotation sensing devices continue to improve in performance as advances in design and processing are made. Present state-of-the-art accelerometers have achieved performance levels in the laboratory that are consistent with requirements for successful application in tactical weapon navigation systems. However, sensor performance parameters that are of interest to the designer of inertial navigation systems are frequently not adequately addressed by the MEMS manufacturer. This paper addresses the testing and characterization of a MEMS accelerometer from an inertial navigation perspective. The paper discusses test objectives, data reduction techniques and presents results from the test of a three-axis MEMS accelerometer conducted at Sandia National Laboratories during 1997. The test was structured to achieve visibility and characterization of the accelerometer bias and scale factor stability overtime and temperature. Sandia is a multi-program laboratory operated by Sandia Corporation, a Lockheed Martin Company, for the US Department of Energy under contract DE-AC04-94AL85000.

  14. MEMS-based tunable gratings and their applications

    Science.gov (United States)

    Yu, Yiting; Yuan, Weizheng; Qiao, Dayong

    2015-03-01

    The marriage of optics and MEMS has resulted in a new category of optical devices and systems that have unprecedented advantages compared with their traditional counterparts. As an important spatial light modulating technology, diffractive optical MEMS obtains a wide variety of successful commercial applications, e.g. projection displays, optical communication and spectral analysis, due to its features of highly compact, low-cost, IC-compatible, excellent performance, and providing possibilities for developing totally new, yet smart devices and systems. Three most successful MEMS diffraction gratings (GLVs, Polychromator and DMDs) are briefly introduced and their potential applications are analyzed. Then, three different MEMS tunable gratings developed by our group, named as micro programmable blazed gratings (μPBGs) and micro pitch-tunable gratings (μPTGs) working in either digital or analog mode, are demonstrated. The strategies to largely enhance the maximum blazed angle and grating period are described. Some preliminary application explorations based on the developed grating devices are also shown. For our ongoing research focus, we will further improve the device performance to meet the engineering application requirements.

  15. Modeling the Performance of MEMS Based Directional Microphones

    Science.gov (United States)

    2008-12-01

    5 B. KARUNASIRI’S BIOMIMICRY WORK ................................................ 8... biomimicry efforts involving the fly’s ear. To show the motivation behind the design of an acoustics MEMS device, it includes a brief description of the...system (From: Miles et al., 1995) B. KARUNASIRI’S BIOMIMICRY WORK Two NPS thesis students working under the mentorship of Professor Gamani Karunasiri

  16. Characterization of dielectric charging in RF MEMS capacitive switches

    NARCIS (Netherlands)

    Herfst, R.W.; Huizing, H.G.A.; Steeneken, P.G.; Schmitz, Jurriaan

    2006-01-01

    RF MEMS capacitive switches show great promise for use in wireless communication devices such as mobile phones, but the successful application of these switches is hindered by reliability concerns: charge injection in the dielectric layer (SiN) can cause irreversible stiction of the moving part of

  17. PECVD silicon carbide surface micromachining technology and selected MEMS applications

    NARCIS (Netherlands)

    Rajaraman, V.; Pakula, L.S.; Yang, H.; French, P.J.; Sarro, P.M.

    2011-01-01

    Attractive material properties of plasma enhanced chemical vapour deposited (PECVD) silicon carbide (SiC) when combined with CMOS-compatible low thermal budget processing provides an ideal technology platform for developing various microelectromechanical systems (MEMS) devices and merging them with

  18. Mechanical Robustness and Hermeticity Monitoring for MEMS Thin Film Encapsulation

    NARCIS (Netherlands)

    Santagata, F.

    2011-01-01

    Many Micro-Electro-Mechanical-Systems (MEMS) require encapsulation, to prevent delicate sensor structures being exposed to external perturbations such as dust, humidity, touching, and gas pressure. An upcoming and cost-effective way of encapsulation is zero-level packaging or thin-film

  19. RF sputtering: A viable tool for MEMS fabrication

    Indian Academy of Sciences (India)

    (PSG), Al, Cr-Au, Pt, etc. for use as structural, sacrificial, piezoelectric and con- ducting material. Deposition of these materials at low temperature is desirable for fabricating sensors/actuators on temperature-sensitive substrates and also for inte- grating MEMS structures on silicon in post-CMOS processing procedures.

  20. 3D Printing and Bioprinting in MEMS Technology

    Directory of Open Access Journals (Sweden)

    Chee Kai Chua

    2017-07-01

    Full Text Available 3D printing and bioprinting have advanced significantly in printing resolution in recent years, which presents a great potential for fabricating small and complex features suitable for microelectromechanical systems (MEMS with new functionalities. This special issue aims to give a glimpse into the future of this research field.

  1. Film evaporation MEMS thruster array for micropropulsion

    Science.gov (United States)

    Cofer, Anthony G.

    Current small sat propulsion systems require a substantial mass fraction of the vehicle involving tradeoffs between useful payload mass and maneuverability. This is also an issue with available attitude control systems which are either quickly saturated reaction wheels or movable high drag surfaces with long response times. What is needed is a low mass low power self-contained propulsion unit that can be easily installed and modeled. The proposed Film-Evaporation MEMS Tunable Array (FEMTA), exploits the small scale surface tension effect in conjunction with temperature dependent vapor pressure to realize a thermal valving system. The local vapor pressure is increased by resistive film heating until it exceeds meniscus strength in the nozzle inducing vacuum boiling which provides a stagnation pressure equal to vapor pressure at that point which is used for propulsion. The heat of vaporization is drawn from the bulk fluid and is replaced by either an integrated heater or waste heat from the vehicle. Proof of concept was initially achieved with a macroscale device made possible by using ethylene glycol, which has a low vapor pressure and high surface tension, as the working fluid. Both the thermal valving effect and cooling feature were demonstrated though at reduced performance than would be expected for water. Three generations of prototype FEMTA devices have been fabricated at Birck Nanotechnology Center on 200 and 500 micrometer thick silicon wafers. Preliminary testing on first generation models had tenuously demonstrated behavior consistent with the macroscale tests but there was not enough data for solid confirmation. Some reliability issues had arisen with the integrated heaters which were only partially alleviated in the second generation of FEMTAs. This led to a third generation and two changes in heater material until a chemically resilient material was found. The third generation of microthrusters were tested on the microNewton thrust stand at Purdue

  2. Programmable Aperture with MEMS Microshutter Arrays

    Science.gov (United States)

    Moseley, Samuel; Li, Mary; Kutyrev, Alexander; Kletetschka, Gunther; Fettig, Rainer

    2011-01-01

    the shutter sits are grounded. The shutters with one or both ungrounded electrodes are held open. Sub-micron bumps underneath light shields and silicon ribs on back walls are the two features to prevent stiction. These features ensure that the microshutter array functions properly in mechanical motions. The MSA technology can be used primarily in multi-object imaging and spectroscopy, photomask generation, light switches, and in the stepper equipment used to make integrated circuits and MEMS (microelectromechanical systems) devices.

  3. Memória: entre o oral e o escrito

    Directory of Open Access Journals (Sweden)

    Maria Aparecida Bergamaschi

    2012-07-01

    Full Text Available  O trabalho discute a relação entre o oral e o escrito sob a perspectiva da memória como experiência humana. Retoma as significações de memória que prevaleceram na história do ocidente, relacionando-as com a oralidade, a escrita e as práticas escolares, evidenciando que, na medida em que a presença da escrita vai se tomando cada vez mais intensa na sociedade e na escola, a memória vai perdendo o prestígio e aparece de forma mais contundente a dicotomia entre memória oral e escrita. O conceito de apropriação, desenvolvido por Chartier, é utilizado para reatar a relação entre memória oral e escrita tendo como palco de análise as práticas escolares e as práticas de escrita entre alguns grupos indígenas brasileiros que têm, historicamente, a tradição oral como traço fundante de suas culturas e que, ao fazerem uso da escrita, reelaboram essa linguagem através de novas relações com a memória.Palavras-chave: oralidade e escrita, memória, práticas escolares.   Abstract The paper discusses the relation between the oral and the written under the perspective of memory as a human experience. It retakes the meanings of memory that prevailed in western history, relating it with the orality, the writing and the school practices, proving that, as the presence of writing becomes more intense in society and in school, memory looses prestige and the dichotomy appears in a stronger way between written and oral memory. The concept of appropriation developed by Chartier, is used in order to tie again the relation between oral and written memory by analyzing school practices and writing practices among some Brazilian indian groups. These groups have, historically, the oral tradition as foundation of their culture and, when writing, they reelaborate this language through new relations with memory. Keywords: oral and written, memory, school practices. 

  4. A New MEMS Gyroscope Used for Single-Channel Damping.

    Science.gov (United States)

    Zhang, Zengping; Zhang, Wei; Zhang, Fuxue; Wang, Biao

    2015-04-30

    The silicon micromechanical gyroscope, which will be introduced in this paper, represents a novel MEMS gyroscope concept. It is used for the damping of a single-channel control system of rotating aircraft. It differs from common MEMS gyroscopes in that does not have a drive structure, itself, and only has a sense structure. It is installed on a rotating aircraft, and utilizes the aircraft spin to make its sensing element obtain angular momentum. When the aircraft is subjected to an angular rotation, a periodic Coriolis force is induced in the direction orthogonal to both the angular momentum and the angular velocity input axis. This novel MEMS gyroscope can thus sense angular velocity inputs. The output sensing signal is exactly an amplitude-modulation signal. Its envelope is proportional to the input angular velocity, and the carrier frequency corresponds to the spin frequency of the rotating aircraft, so the MEMS gyroscope can not only sense the transverse angular rotation of an aircraft, but also automatically change the carrier frequency over the change of spin frequency, making it very suitable for the damping of a single-channel control system of a rotating aircraft. In this paper, the motion equation of the MEMS gyroscope has been derived. Then, an analysis has been carried to solve the motion equation and dynamic parameters. Finally, an experimental validation has been done based on a precision three axis rate table. The correlation coefficients between the tested data and the theoretical values are 0.9969, 0.9872 and 0.9842, respectively. These results demonstrate that both the design and sensing mechanism are correct.

  5. In vivo cellular imaging with microscopes enabled by MEMS scanners

    Science.gov (United States)

    Ra, Hyejun

    High-resolution optical imaging plays an important role in medical diagnosis and biomedical research. Confocal microscopy is a widely used imaging method for obtaining cellular and sub-cellular images of biological tissue in reflectance and fluorescence modes. Its characteristic optical sectioning capability also enables three-dimensional (3-D) image reconstruction. However, its use has mostly been limited to excised tissues due to the requirement of high numerical aperture (NA) lenses for cellular resolution. Microscope miniaturization can enable in vivo imaging to make possible early cancer diagnosis and biological studies in the innate environment. In this dissertation, microscope miniaturization for in vivo cellular imaging is presented. The dual-axes confocal (DAC) architecture overcomes limitations of the conventional single-axis confocal (SAC) architecture to allow for miniaturization with high resolution. A microelectromechanical systems (MEMS) scanner is the central imaging component that is key in miniaturization of the DAC architecture. The design, fabrication, and characterization of the two-dimensional (2-D) MEMS scanner are presented. The gimbaled MEMS scanner is fabricated on a double silicon-on-insulator (SOI) wafer and is actuated by self-aligned vertical electrostatic combdrives. The imaging performance of the MEMS scanner in a DAC configuration is shown in a breadboard microscope setup, where reflectance and fluorescence imaging is demonstrated. Then, the MEMS scanner is integrated into a miniature DAC microscope. The whole imaging system is integrated into a portable unit for research in small animal models of human biology and disease. In vivo 3-D imaging is demonstrated on mouse skin models showing gene transfer and siRNA silencing. The siRNA silencing process is sequentially imaged in one mouse over time.

  6. Efeito de um programa de treinamento da memória de trabalho em adultos idosos Effect of a working memory training program in older adults

    Directory of Open Access Journals (Sweden)

    Tânia Maria Netto

    2013-01-01

    Full Text Available Este estudo objetivou examinar os efeitos de um Treinamento da Memória de Trabalho (TMT em idosos saudáveis. Vinte participantes compuseram a amostra final, onze do grupo experimental (TMT e nove do controle (socialização. Todos foram submetidos a uma avaliação neuropsicológica pré e pós-intervenção. Os encontros foram realizados uma vez por semana, durante três meses. Houve melhora significativa, no grupo experimental, em atenção concentrada, aprendizagem, memória de curto prazo e episódica, e no grupo controle, em um menor número de variáveis, na atenção concentrada e memória episódica. O TMT parece ter promovido efeito de transferência, principalmente na memória episódica, que é relacionada diretamente aos subsistemas da memória de trabalho (MT, sugerindo que o TMT pode ser útil no contexto da neuropsicologia do envelhecimento.The present study examined the effects of a Working Memory Training (WMT in healthy elderly. Twenty participants comprised the final sample, eleven from the experimental group (WMT and nine from the control group (socialization. Every subject underwent a neuropsychological evaluation pre and post-intervention. The meetings were held once a week, for three months. Results indicated that subjects in the experimental group improved cognitive functions related to concentrated attention, learning, short-term and episodic memory. Subjects in the control group also demonstrated, in a smaller number of variables, improvement in concentrated attention and episodic memory. WMT seems to have generated a transfer effect, especially to episodic memory, which is directly related to the subsystem of working memory (WM, suggesting that WMT may be useful in the context of the neuropsychology of aging.

  7. Hyper-interspersed NANO/MEMS - Architecture design for new concepts in miniature robotics for space exploration

    Science.gov (United States)

    Santoli, Salvatore

    1999-05-01

    Launch weight and volume requirements are substantially decreased by reduction of probe size in exploration mission systems, as mass and volume both scale as the third power of system size. Accordingly, the already quite developed MEMS (Micro Electro Mechanical System) technology, that offers low cost, small, light weight, and increasingly reliable devices through durability and redundancy, is strongly attractive as a near-term technology for significantly reducing the cost to launch and operate space systems. It is shown that the final goal of MEMS technology, i.e. the merging through solid state microdcvices of the functions of sensing, computation, communication and actuation, can lead to a new, biomimetic kind of miniature robotics, particularly suitable for planetary exploration, through molecular mono- electronics/MEMS integration jointly with a hyper-interspersed architecture made up of autonomous units embodying sensors, information processors and actuators. The problem tackled here concerns the basic design of such miniature robots, from some μm to insect size, featuring finely structured intelligent autonomous parts as smart skins, sensory and manipulating members working on the analogue external reality and communicating with their inner molecular level nondiscrete pseudo-analogue information processing networks. The (mesoscopic network)/MEMS units are shown to embody a quantum mechanical/macroscopic world connection, in which the nondiscrete molecular devices allow the automaton parts to perform very complex, fast information processing operations as metaphores of bionic functions like learning, attention, and decision making under uncertain conditions, this last due to the stochasticity inherent in the quantum network. Flexible architectures instead of von Neumann type rigid architectures in addition to hyper-interspersion of autonomous units can be realized through such nano/MEMS devices, and the μm — cm size of the whole robots and their organs

  8. "SAMs meet MEMS": surface modification with self-assembled monolayers for the dry-demolding of photoplastic MEMS/NEMS

    NARCIS (Netherlands)

    Kim, B.J.; Kim, G.M.; Liebau, M.; Huskens, Jurriaan; Reinhoudt, David; Brugger, J.P.

    2001-01-01

    In this contribution we demonstrate the use of self-assembled monolayers (SAMs) as anti-adhesion coating to assist the removal of photoplastic MEMS/NEMS with a patterned metal layer from the surface without wet chemical sacrificial layer etching, so-called 'dry-demolding'. The SAMs functionality

  9. Opportunities and challenges for MEMS technology in Army missile systems applications

    Science.gov (United States)

    Ruffin, Paul B.

    1999-07-01

    The military market drives the thrust for the development of robust, high performance MicroElectroMechanical Systems (MEMS) devices with applications such as: competent and smart munitions, aircraft and missile autopilots, tactical missile guidance, fire control systems, platform stabilization, smart structures with embedded inertial sensors, missile system health monitoring, aerodynamic flow control, and multiple intelligent small projectiles. Army missile applications will be a fertile market for MEMS products, such as MEMS-based inertial sensors. MEMS technology should significantly enhance performance and provide more robust mission capability in applications where arrays of MEMS devices are required. The Army Aviation and Missile Command Missile Research, Development, and Engineering Center is working diligently with other government agencies, academia, and industry to develop high performing MEMS devices to withstand shock, vibration, temperature, humidity, and long-term storage conditions often encountered by Army missile systems. The goals of the ongoing DARPA MEMS technology programs will meet a significant portion of the Army missile systems requirements. In lieu of presenting an all-inclusive review of Army MEMS applications, this paper addresses a number of opportunities and associated challenges for MEMS systems operating in military environments. Near term applications and the less mature, high-risk applications of MEMS devices are addressed.

  10. Evaluation of Megacell MEM as a storage medium for corneas destined for transplantation.

    Science.gov (United States)

    Smith, Valerie A; Johnson, Terrell

    2010-01-01

    Gibco's Minimum Essential Medium with Earle's salts and HEPES supplemented with glutamine, antibiotics (EB MEM) and 2% foetal calf serum (FCS) is used in European eye banks to store corneas. Although FCS is important to endothelial cell survival in this medium, it is a potential biohazard. Megacell MEM, formulated to reduce the FCS requirement of cells by a factor of 5, has therefore been evaluated as a corneal storage medium. Corneal stromal and epithelial cells were incubated in Megacell MEM (serum-free or 2% FCS) to assess their viability in these media. Endothelial cell densities of paired corneas held in either EB MEM 2% FCS or Megacell MEM (serum-free or 2% FCS) were measured over 5 weeks. Discs subsequently punched from the centre of these corneas were weighed, dried and reweighed to determine hydration levels. Both corneal stromal and epithelial cells proliferated in Megacell MEM 2% FCS. Relative to EB MEM, 2% FCS Megacell MEM prolonged the viability of corneal endothelial cells and improved their morphological appearance, irrespective of whether it contained FCS or not. This was independent of corneal swelling. Serum-free Megacell MEM is a better storage medium than EB MEM 2% FCS for corneas destined for transplantation. Copyright 2009 S. Karger AG, Basel.

  11. Performance Analysis of Adaptive Neuro Fuzzy Inference System Control for MEMS Navigation System

    Directory of Open Access Journals (Sweden)

    Ling Zhang

    2014-01-01

    Full Text Available Characterized by small volume, low cost, and low power, MEMS inertial sensors are widely concerned and applied in navigation research, environmental monitoring, military, and so on. Notably in indoor and pedestrian navigation, its easily portable feature seems particularly indispensable and important. However, MEMS inertial sensor has inborn low precision and is impressionable and sometimes goes against accurate navigation or even becomes seriously unstable when working for a period of time and the initial alignment and calibration are invalid. A thought of adaptive neuro fuzzy inference system (ANFIS is relied on, and an assistive control modulated method is presented in this paper, which is newly designed to improve the inertial sensor performance by black box control and inference. The repeatability and long-time tendency of the MEMS sensors are tested and analyzed by ALLAN method. The parameters of ANFIS models are trained using reasonable fuzzy control strategy, with high-precision navigation system for reference as well as MEMS sensor property. The MEMS error nonlinearity is measured and modulated through the peculiarity of the fuzzy control convergence, to enhance the MEMS function and the whole MEMS system property. Performance of the proposed model has been experimentally verified using low-cost MEMS inertial sensors, and the MEMS output error is well compensated. The test results indicate that ANFIS system trained by high-precision navigation system can efficiently provide corrections to MEMS output and meet the requirement on navigation performance.

  12. Design and Fabrication of a Reconfigurable MEMS-Based Antenna

    KAUST Repository

    Martinez, Miguel Angel Galicia

    2011-06-22

    This thesis presents the design and fabrication of a customized in house Micro-Electro-Mechanical-Systems (MEMS) process based on-chip antenna that is both frequency and polarization reconfigurable. It is designed to work at both 60 GHz and 77 GHz through MEMS switches. This antenna can also work in both horizontal and vertical linear polarizations by utilizing a moveable plate. The design is intended for Wireless Personal Area Networks (WPAN) and automotive radar applications. Typical on-chip antennas are inefficient and difficult to reconfigure. Therefore, the focus of this work is to develop an efficient on-chip antenna solution, which is reconfigurable in frequency and in polarization. A fractal bowtie antenna is employed for this thesis, which achieves frequency reconfigurability through MEMS switches. The design is simulated in industry standard Electromagnetic (EM) simulator Ansoft HFSS. A novel concept for horizontal to vertical linear polarization agility is introduced which incorporates a moveable polymer plate. For this work, a microprobe is used to move the plate from the horizontal to vertical position. For testing purposes, a novel mechanism has been designed in order to feed the antenna with RF-probes in both horizontal and vertical positions. A simulated gain of approximately 0 dB is achieved at both target frequencies (60 and 77 GHz), in both horizontal and vertical positions. In all the cases mentioned above (both frequencies and positions), the antenna is well matched (< -10 dB) to the 50 Ω system impedance. Similarly, the radiation nulls are successfully shifted by changing the position of the antenna from horizontal to vertical. The complete design and fabrication of the reconfigurable MEMS antenna has been done at KAUST facilities. Some challenges have been encountered during its realization due to the immaturity of the customized MEMS fabrication process. Nonetheless, a first fabrication attempt has highlighted such shortcomings. According

  13. Direct integration of MEMS, dielectric pumping and cell manipulation with reversibly bonded gecko adhesive microfluidics

    Science.gov (United States)

    Warnat, S.; King, H.; Wasay, A.; Sameoto, D.; Hubbard, T.

    2016-09-01

    We present an approach to form a microfluidic environment on top of MEMS dies using reversibly bonded microfluidics. The reversible polymeric microfluidics moulds bond to the MEMS die using a gecko-inspired gasket architecture. In this study the formed microchannels are demonstrated in conjunction with a MEMS mechanical single cell testing environment for BioMEMS applications. A reversible microfluidics placement technique with an x-y and rotational accuracy of  ±2 µm and 1° respectively on a MEMS die was developed. No leaks were observed during pneumatic pumping of common cell media (PBS, sorbitol, water, seawater) through the fluidic channels. Thermal chevron actuators were successful operated inside this fluidic environment and a performance deviation of ~15% was measured compared to an open MEMS configuration. Latex micro-spheres were pumped using traveling wave di-electrophoresis and compared to an open (no-microfluidics) configuration with velocities of 24 µm s-1 and 20 µm s-1.

  14. Application of RF-MEMS-Based Split Ring Resonators (SRRs to the Implementation of Reconfigurable Stopband Filters: A Review

    Directory of Open Access Journals (Sweden)

    Ferran Martín

    2014-12-01

    Full Text Available In this review paper, several strategies for the implementation of reconfigurable split ring resonators (SRRs based on RF-MEMS switches are presented. Essentially three types of RF-MEMS combined with split rings are considered: (i bridge-type RF-MEMS on top of complementary split ring resonators CSRRs; (ii cantilever-type RF-MEMS on top of SRRs; and (iii cantilever-type RF-MEMS integrated with SRRs (or RF-MEMS SRRs. Advantages and limitations of these different configurations from the point of view of their potential applications for reconfigurable stopband filter design are discussed, and several prototype devices are presented.

  15. Application of RF-MEMS-based split ring resonators (SRRs) to the implementation of reconfigurable stopband filters: a review.

    Science.gov (United States)

    Martín, Ferran; Bonache, Jordi

    2014-12-02

    In this review paper, several strategies for the implementation of reconfigurable split ring resonators (SRRs) based on RF-MEMS switches are presented. Essentially three types of RF-MEMS combined with split rings are considered: (i) bridge-type RF-MEMS on top of complementary split ring resonators CSRRs; (ii) cantilever-type RF-MEMS on top of SRRs; and (iii) cantilever-type RF-MEMS integrated with SRRs (or RF-MEMS SRRs). Advantages and limitations of these different configurations from the point of view of their potential applications for reconfigurable stopband filter design are discussed, and several prototype devices are presented.

  16. Mediating Role of Perceived Organizational Support on the Impact of Psychol ogical Capital on Organizational Identification

    Directory of Open Access Journals (Sweden)

    Haluk Erdem

    2015-06-01

    Full Text Available Employees’ loyalty toward organizations is decreasing gradually recently. This phenomenon negatively affects the dimensions of organizational behavior directly or indirectly. In this study, the effect of psychological capital on organizational identification, and the mediating role of perceived org anizational support in this association are explored. Thereby, data based on the government employees in Bitlis Province (n=478 are analyzed (exploratory and confirmatory factor analyses, regression analysis and it is supported that psychological capital increases positively and significantly perceived organizational support and organizational identification. Besides, the mediating role of organizational support in the association between psychological capital and organizational identification is supporte d using tree step regression analysis and Sobel Test

  17. MEMS/ECD Method for Making Bi(2-x)Sb(x)Te3 Thermoelectric Devices

    Science.gov (United States)

    Lim, James; Huang, Chen-Kuo; Ryan, Margaret; Snyder, G. Jeffrey; Herman, Jennifer; Fleurial, Jean-Pierre

    2008-01-01

    A method of fabricating Bi(2-x)Sb(x)Te3-based thermoelectric microdevices involves a combination of (1) techniques used previously in the fabrication of integrated circuits and of microelectromechanical systems (MEMS) and (2) a relatively inexpensive MEMS-oriented electrochemical-deposition (ECD) technique. The present method overcomes the limitations of prior MEMS fabrication techniques and makes it possible to satisfy requirements.

  18. Role of MEMS in Biomedical Application: A Review

    Directory of Open Access Journals (Sweden)

    Himani SHARMA

    2010-04-01

    Full Text Available In this review, we have focused over MEMS (Micro Electro Mechanical System technology in the area of biomedical, which have played in important role-as diagnostic equipment in the diagnoses of different human body parts. The miniaturization of classical “bulky” measurement techniques has led to the realization of complex analytic systems, including such sensors as a Biochem Lab-On-Chip. This rapid progress in miniature devices and instrumentation development will significantly impact the practice of medical care as well as future advances in the biomedical field. Recently, MEMS along with modern IC also effected significantly on electrochemical, optical and acoustic wave transducer technologies, which have emerged as some of the most promising biomedical sensing technologies. Here, important features of these technologies, along with new developments and some of the applications, are presented.

  19. Micro-motion analyzer used for dynamic MEMS characterization

    Science.gov (United States)

    Guo, Tong; Chang, Hong; Chen, Jinping; Fu, Xing; Hu, Xiaotang

    2009-03-01

    A computer-controlled micro-motion analyzer (MMA) to study the dynamic behavior of movable structures of MEMS is described in this paper. It employs two optical nondestructive methods—computer microvision for in-plane motion measurement and phase-shifting interferometry for out-of-plane motion measurement. This fully integrated system includes a high-performance imaging system, drive electronics, data acquisition and data analysis software. This system can freeze the fast motions of MEMS devices using strobed illumination and measure motions in three dimensions with nanometer accuracy. The static measurement accuracy and repeatability of the system is calibrated by a step height standard which is certified by National Institute of Standards and Technology (NIST). The capabilities of this system are illustrated with a study of the dynamic behaviors of a surface micromachined polysilicon micro-resonator.

  20. New Trends on MEMS Sensor Technology for Harsh Environment Applications

    Directory of Open Access Journals (Sweden)

    Patricia M. NIEVA

    2007-10-01

    Full Text Available MEMS and NEMS sensor systems that can operate in the presence of high temperatures, corrosive media, and/or high radiation hold great promise for harsh environment applications. They would reduce weight, improve machine reliability and reduce cost in strategic market sectors such as automotive, avionics, oil well logging, and nuclear power. This paper presents a review of the recent advances in harsh-environment MEMS and NEMS sensors focusing on materials and devices. Special emphasis is put on high-temperature operation. Wide-bandgap semiconductor materials for high temperature applications are discussed from the device point of view. Micro-opto mechanical systems (MOEMS are presented as a new trend for high temperature applications. As an example of a harsh environment MOEMS sensor, a vibration sensor is presented.

  1. Probing Quantum Turbulence in He II with a MEMS Oscillator

    Science.gov (United States)

    Levental, Aleksander; Bauer, Josh; Gonzalez, Miguel; Zheng, Pan; Lee, Yoonseok; Bun Chan, Ho

    2013-03-01

    Micrometer scale mechanical oscillators based on MEMS technology have been developed for the study of quantum fluids and have been tested successfully at ultra low temperatures. Our recent low temperature test in which the device was immersed in the superfluid phase of 4He revealed striking behavior below 400 mK: nonlinear and hysteretic resonance at high excitations. The observed phenomenon is thought to be related to vortices and quantum turbulence and warrants a systematic investigation for better understanding. We constructed an experimental set-up that allows us to cool a MEMS device in liquid 4He down to 50 mK at pressures up to 25 bar. We will discuss our new set-up and present our preliminary results performed at saturated vapor pressure. This work is supported by NSF through DMR-1205891 (YL).

  2. Robust adaptive control of MEMS triaxial gyroscope using fuzzy compensator.

    Science.gov (United States)

    Fei, Juntao; Zhou, Jian

    2012-12-01

    In this paper, a robust adaptive control strategy using a fuzzy compensator for MEMS triaxial gyroscope, which has system nonlinearities, including model uncertainties and external disturbances, is proposed. A fuzzy logic controller that could compensate for the model uncertainties and external disturbances is incorporated into the adaptive control scheme in the Lyapunov framework. The proposed adaptive fuzzy controller can guarantee the convergence and asymptotical stability of the closed-loop system. The proposed adaptive fuzzy control strategy does not depend on accurate mathematical models, which simplifies the design procedure. The innovative development of intelligent control methods incorporated with conventional control for the MEMS gyroscope is derived with the strict theoretical proof of the Lyapunov stability. Numerical simulations are investigated to verify the effectiveness of the proposed adaptive fuzzy control scheme and demonstrate the satisfactory tracking performance and robustness against model uncertainties and external disturbances compared with conventional adaptive control method.

  3. Fabrication and characterization of PZT string based MEMS devices

    Directory of Open Access Journals (Sweden)

    D.T. Huong Giang

    2016-06-01

    Full Text Available String based MEMS devices recently attract world technology development thanks to their advantages over cantilever ones. Approaching to this direction, the paper reports on the micro-fabrication and characterization of free-standing doubly clamped piezoelectric beams based on heterostructures of Pd/FeNi/Pd/PZT/LSMO/STO/Si. The displacement of strings is investigated in both static and dynamic mode. The static response exhibits a bending displacement as large as 1.2 μm, whereas the dynamic response shows a strong resonance with a high quality factor of around 35 depending on the resonant mode at atmospheric pressure. These findings are comparable with those observed in large dimension membrane and cantilever based MEMS devices, which exhibit high potentials in variety of sensor and resonant actuator applications.

  4. A Novel Control System Design for Vibrational MEMS Gyroscopes

    Directory of Open Access Journals (Sweden)

    Qing Zheng

    2007-04-01

    Full Text Available There are two major control problems associated with vibrational MEMS gyroscopes: to control two vibrating axes (or modes of the gyroscope, and to estimate a time-varying rotation rate. This paper demonstrates how a novel active disturbance rejection control addresses these problems in the presence of the mismatch of natural frequencies between two axes, mechanical-thermal noises, Quadrature errors, and parameter variations. A demodulation approach based on the estimated dynamics of the system by an extended state observer is used to estimate the rotation rate. The simulation results on a Z-axis MEMS gyroscope show that the controller is very effective by driving the output of the drive axis to a desired trajectory, forcing the vibration of the sense axis to zero for a force-to-rebalance operation and precisely estimating the rotation rate.

  5. Microcutting and forming of thin aluminium foils for MEMS

    DEFF Research Database (Denmark)

    Damsgaard, Christian Danvad; Mortensen, Dennis; Rombach, Pirmin

    2011-01-01

    This paper presents a simple procedure for simultaneous cutting and forming of thin Al foils for use in MEMS components. The procedure makes use of scaled down macroscopic sheet forming and cutting techniques by using a hydraulic press, a soft counterpart, and a microfabricated stamp tool....... The relation between applied pressure and forming and cutting features has been characterized for a specific set of stamp geometries and boundary conditions. The results show that 10 μm forming features can be transferred to 4 m thick Al foils, which simultaneously can be cut into products by 25 μm wide cut...... lines. Using the procedure presented in this paper scaled to full 4-8 in. silicon wafer stamp tools, a fast and adequate method for high volume production of MEMS components is obtained. © 2011 American Society of Mechanical Engineers....

  6. Holographic 3D display using MEMS spatial light modulator

    Science.gov (United States)

    Takaki, Yasuhiro

    2012-06-01

    This paper presents a new holographic three-dimensional display technique that increases both viewing zone angle and screen size. In this study, a spatial light modulator (SLM) employing microelectromechanical systems (MEMS) technology is used for high-speed image generation. The images generated by the MEMS SLM are demagnified horizontally and magnified vertically using an anamorphic imaging system. The vertically enlarged images, which are elementary holograms, are aligned horizontally by a galvano scanner. Reconstructed images with a screen size of 4.3 in and a horizontal viewing zone angle of 15° are generated at a frame rate of 60 fps. The reconstructed images are improved by two methods: one reduces blur caused by scan and focus errors, and the other improves grayscale representation. In addition, accommodation responses of eyes to the reconstructed images are explained.

  7. Interface Circuit Design for Frequency-Time Domain MEMS Sensors

    Energy Technology Data Exchange (ETDEWEB)

    Yurish, Sergey Y [Information Systems and Networks, National University Lviv Polytechnic, Bandera str., 12 Lviv, 79013 (Ukraine); Kirianaki, Nikolay V [International Frequency Sensor Association (IFSA), Bandera str., 12 Lviv, 79013 (Ukraine)

    2006-04-01

    The focus of this paper is to describe emerging techniques and methods for interface circuit design for frequency, period, duty-cycle or PWM output MEMS sensors. The designed module is intended for frequency-time parameters - to - digital conversion and communication functions and can be embedded into a SoC. The developed interface circuit provides technologies that both reduce the cost and time of SoC development and improve sensor system performance. Its revolutionary suite of technical products facilitates, for the first time, low-cost, time-efficient production of MEMS sensor applications. On the other hand the proposed design approach reduces the development time, risk and cost of sensor applications by to ten times.

  8. MEMS based stencil lithography for mechanically tunable metasurfaces

    Science.gov (United States)

    Reeves, Jeremy; Stark, Thomas; Jayne, Rachael; Barrett, Lawrence; Lally, Richard; Bishop, David

    We present a scalable technique for nanoscale patterning on soft microstructured substrates. Polymer substrates are 3D-printed onto a microelectromechanical systems (MEMS) device which enables the precise alignment of a MEMS stencil relative to the substrate. With this technique, we fabricate optical metamaterials on two dimensional substrates with lattice geometries that allow for the deformation of the lattice unit cells by the application of mechanical strain. Unit cells can be designed to stretch or rotate, giving the substrate auxetic properties. Physical vapor deposition is used to apply metallic metamaterial patterns, defined on the stencil, to the polymer substrates. The fabricated surfaces demonstrate tunable infrared responses, enabled by the elongation or rotation of the substrate lattice unit cells. We discuss our fabrication technique, the potential for use with other types of substrates, and explore its scalability. The project is funded through the DARPA A2P program.

  9. NASA NDE Applications for Mobile MEMS Devices and Sensors

    Science.gov (United States)

    Wilson, William C.; Atkinson, Gary M.; Barclay, R. O.

    2008-01-01

    NASA would like new devices and sensors for performing nondestructive evaluation (NDE) of aerospace vehicles. These devices must be small in size/volume, mass, and power consumption. The devices must be autonomous and mobile so they can access the internal structures of aircraft and spacecraft and adequately monitor the structural health of these craft. The platforms must be mobile in order to transport NDE sensors for evaluating structural integrity and determining whether further investigations will be required. Microelectromechanical systems (MEMS) technology is crucial to the development of the mobile platforms and sensor systems. This paper presents NASA s needs for micro mobile platforms and MEMS sensors that will enable NDE to be performed on aerospace vehicles.

  10. Microelectromechanical (MEMS) manipulators for control of nanoparticle coupling interactions

    Science.gov (United States)

    Lopez, Daniel; Wiederrecht, Gary; Gosztola, David J.; Mancini, Derrick C.

    2017-01-17

    A nanopositioning system for producing a coupling interaction between a first nanoparticle and a second nanoparticle. A first MEMS positioning assembly includes an electrostatic comb drive actuator configured to selectively displace a first nanoparticle in a first dimension and an electrode configured to selectively displace the first nanoparticle in a second dimensions. Accordingly, the first nanoparticle may be selectively positioned in two dimensions to modulate the distance between the first nanoparticle and a second nanoparticle that may be coupled to a second MEMS positioning assembly. Modulating the distance between the first and second nanoparticles obtains a coupling interaction between the nanoparticles that alters at least one material property of the nanoparticles applicable to a variety of sensing and control applications.

  11. Anticipating, measuring, and minimizing MEMS mirror scan error to improve laser scanning microscopy's speed and accuracy.

    Science.gov (United States)

    Giannini, John P; York, Andrew G; Shroff, Hari

    2017-01-01

    We describe a method to speed up microelectromechanical system (MEMS) mirror scanning by > 20x, while also improving scan accuracy. We use Landweber deconvolution to determine an input voltage which would produce a desired output, based on the measured MEMS impulse response. Since the MEMS is weakly nonlinear, the observed behavior deviates from expectations, and we iteratively improve our input to minimize this deviation. This allows customizable MEMS angle vs. time with <1% deviation from the desired scan pattern. We demonstrate our technique by optimizing a point scanning microscope's raster patterns to image mammal submandibular gland and pollen at ~10 frames/s.

  12. Evaluation of MEMS-Based Wireless Accelerometer Sensors in Detecting Gear Tooth Faults in Helicopter Transmissions

    Science.gov (United States)

    Lewicki, David George; Lambert, Nicholas A.; Wagoner, Robert S.

    2015-01-01

    The diagnostics capability of micro-electro-mechanical systems (MEMS) based rotating accelerometer sensors in detecting gear tooth crack failures in helicopter main-rotor transmissions was evaluated. MEMS sensors were installed on a pre-notched OH-58C spiral-bevel pinion gear. Endurance tests were performed and the gear was run to tooth fracture failure. Results from the MEMS sensor were compared to conventional accelerometers mounted on the transmission housing. Most of the four stationary accelerometers mounted on the gear box housing and most of the CI's used gave indications of failure at the end of the test. The MEMS system performed well and lasted the entire test. All MEMS accelerometers gave an indication of failure at the end of the test. The MEMS systems performed as well, if not better, than the stationary accelerometers mounted on the gear box housing with regards to gear tooth fault detection. For both the MEMS sensors and stationary sensors, the fault detection time was not much sooner than the actual tooth fracture time. The MEMS sensor spectrum data showed large first order shaft frequency sidebands due to the measurement rotating frame of reference. The method of constructing a pseudo tach signal from periodic characteristics of the vibration data was successful in deriving a TSA signal without an actual tach and proved as an effective way to improve fault detection for the MEMS.

  13. Improved High-Rejection Filters and MEMS-Enabled Smart Reconfigurable Antennas Project

    Data.gov (United States)

    National Aeronautics and Space Administration — Proposed work envisions development of high-rejection filters and smart reconfigurable antennas using MEMS switches. Adaptive feature of the proposed antenna...

  14. System-Level Modelling and Simulation of MEMS-Based Sensors

    DEFF Research Database (Denmark)

    Virk, Kashif M.; Madsen, Jan; Shafique, Mohammad

    2005-01-01

    The growing complexity of MEMS devices and their increased used in embedded systems (e.g., wireless integrated sensor networks) demands a disciplined aproach for MEMS design as well as the development of techniques for system-level modeling of these devices so that a seamless integration with the......The growing complexity of MEMS devices and their increased used in embedded systems (e.g., wireless integrated sensor networks) demands a disciplined aproach for MEMS design as well as the development of techniques for system-level modeling of these devices so that a seamless integration...

  15. Fatigue and Fracture of Polycrystalline Silicon and Diamond MEMS at Room and Elevated Temperatures

    National Research Council Canada - National Science Library

    Chasiotis, Ioannis

    2006-01-01

    ...) and polycrystalline silicon (polysilicon) for microelectromechanical systems (MEMS). Polysilicon and ta-C test structures were fabricated at the Sandia National Laboratories (SNL) and at MCNC-Cronos...

  16. A Fully Symmetric and Completely Decoupled MEMS-SOI Gyroscope

    OpenAIRE

    Abdelhameed SHARAF; Sherif SEDKY; Mohamed SERRY; Amro ELSHURAFA; Mahmoud ASHOUR; S. E.-D. HABIB

    2011-01-01

    This paper introduces a novel MEMS gyroscope that is capable of exciting the drive mode differentially. The structure also decouples the drive and sense modes via an intermediate mass and decoupling beams. Both drive and sense modes are fully differential enabling control over the zero-rate-output for the former and maximizing output sensitivity using a bridge circuit for the latter. Further, the structure is fully symmetric about the x- and y- axes which results in minimizing the temperature...

  17. Fabrication of MEMS components using ultra fine grained aluminium

    OpenAIRE

    Qiao, X.; Gao, N.; Moktadir, Zakaria; Michael, Kraft; Starink, M.J.

    2010-01-01

    A novel process for the fabrication of a microelectromechanical systems (MEMS) metallic component with features smaller than 10 µm and high thermal conductivity was investigated. This may be applied to new or improved microscale components, such as (micro-) heat exchangers. In the first stage of processing, equal channel angular pressing (ECAP) was employed to refine the grain size of commercial purity aluminium (Al-1050) to the ultrafine-grained (UFG) material. Embossing was conducted using ...

  18. Stylus type MEMS texture sensor covered with corrugated diaphragm

    Science.gov (United States)

    Tsukamoto, Takashiro; Asao, Hideaki; Tanaka, Shuji

    2017-09-01

    In this paper, a stylus type MEMS texture sensor covered with a corrugated palylene diaphragm, which prevent debris from jamming into the sensor without significant degradation of sensitivity and bandwidth, was reported. A new fabrication process using a lost-foil method to make the corrugated diaphragm on a 3-axis piezoresistive force sensor at wafer level has been developed. The texture sensor could detect the surface microstructure as small as about 10 \

  19. Measurement of the Earth tides with a MEMS gravimeter.

    Science.gov (United States)

    Middlemiss, R P; Samarelli, A; Paul, D J; Hough, J; Rowan, S; Hammond, G D

    2016-03-31

    The ability to measure tiny variations in the local gravitational acceleration allows, besides other applications, the detection of hidden hydrocarbon reserves, magma build-up before volcanic eruptions, and subterranean tunnels. Several technologies are available that achieve the sensitivities required for such applications (tens of microgal per hertz(1/2)): free-fall gravimeters, spring-based gravimeters, superconducting gravimeters, and atom interferometers. All of these devices can observe the Earth tides: the elastic deformation of the Earth's crust as a result of tidal forces. This is a universally predictable gravitational signal that requires both high sensitivity and high stability over timescales of several days to measure. All present gravimeters, however, have limitations of high cost (more than 100,000 US dollars) and high mass (more than 8 kilograms). Here we present a microelectromechanical system (MEMS) device with a sensitivity of 40 microgal per hertz(1/2) only a few cubic centimetres in size. We use it to measure the Earth tides, revealing the long-term stability of our instrument compared to any other MEMS device. MEMS accelerometers--found in most smart phones--can be mass-produced remarkably cheaply, but none are stable enough to be called a gravimeter. Our device has thus made the transition from accelerometer to gravimeter. The small size and low cost of this MEMS gravimeter suggests many applications in gravity mapping. For example, it could be mounted on a drone instead of low-flying aircraft for distributed land surveying and exploration, deployed to monitor volcanoes, or built into multi-pixel density-contrast imaging arrays.

  20. Wearable Wireless Telemetry System for Implantable BioMEMS Sensors

    Science.gov (United States)

    Simons, Rainee N.; Miranda, Felix A.; Wilson, Jeffrey D.; Simons, Renita E.

    2008-01-01

    Telemetry systems of a type that have been proposed for the monitoring of physiological functions in humans would include the following subsystems: Surgically implanted or ingested units that would comprise combinations of microelectromechanical systems (MEMS)- based sensors [bioMEMS sensors] and passive radio-frequency (RF) readout circuits that would include miniature loop antennas. Compact radio transceiver units integrated into external garments for wirelessly powering and interrogating the implanted or ingested units. The basic principles of operation of these systems are the same as those of the bioMEMS-sensor-unit/external-RFpowering- and-interrogating-unit systems described in "Printed Multi-Turn Loop Antennas for Biotelemetry" (LEW-17879-1) NASA Tech Briefs, Vol. 31, No. 6 (June 2007), page 48, and in the immediately preceding article, "Hand-Held Units for Short-Range Wireless Biotelemetry" (LEW-17483-1). The differences between what is reported here and what was reported in the cited prior articles lie in proposed design features and a proposed mode of operation. In a specific system of the type now proposed, the sensor unit would comprise mainly a capacitive MEMS pressure sensor located in the annular region of a loop antenna (more specifically, a square spiral inductor/ antenna), all fabricated as an integral unit on a high-resistivity silicon chip. The capacitor electrodes, the spiral inductor/antenna, and the conductor lines interconnecting them would all be made of gold. The dimensions of the sensor unit have been estimated to be about 110.4 mm. The external garment-mounted powering/ interrogating unit would include a multi-turn loop antenna and signal-processing circuits. During operation, this external unit would be positioned in proximity to the implanted or ingested unit to provide for near-field, inductive coupling between the loop antennas, which we have as the primary and secondary windings of an electrical transformer.

  1. Simulated SAM A-scans on multilayer MEMS components

    DEFF Research Database (Denmark)

    Janting, Jakob; Petersen, Dirch Hjorth; Greisen, Christoffer

    2002-01-01

    A spreadsheet program for simulation of Scanning Acoustic Microscopy (SAM) A-scans on multilayer structures has been developed. Using this program, structure variations in samples can be analysed better. Further samples can be prepared to get optimal signal for enhanced failure and materials anal....... The calculation of N, the program interface, and simulated A-scans on MEMS test structures for a pressure sensor are presented. (C) 2002 Elsevier Science Ltd. All rights reserved....

  2. Measurement of the Earth tides with a MEMS gravimeter

    Science.gov (United States)

    Middlemiss, R. P.; Samarelli, A.; Paul, D. J.; Hough, J.; Rowan, S.; Hammond, G. D.

    2016-03-01

    The ability to measure tiny variations in the local gravitational acceleration allows, besides other applications, the detection of hidden hydrocarbon reserves, magma build-up before volcanic eruptions, and subterranean tunnels. Several technologies are available that achieve the sensitivities required for such applications (tens of microgal per hertz1/2): free-fall gravimeters, spring-based gravimeters, superconducting gravimeters, and atom interferometers. All of these devices can observe the Earth tides: the elastic deformation of the Earth’s crust as a result of tidal forces. This is a universally predictable gravitational signal that requires both high sensitivity and high stability over timescales of several days to measure. All present gravimeters, however, have limitations of high cost (more than 100,000 US dollars) and high mass (more than 8 kilograms). Here we present a microelectromechanical system (MEMS) device with a sensitivity of 40 microgal per hertz1/2 only a few cubic centimetres in size. We use it to measure the Earth tides, revealing the long-term stability of our instrument compared to any other MEMS device. MEMS accelerometers—found in most smart phones—can be mass-produced remarkably cheaply, but none are stable enough to be called a gravimeter. Our device has thus made the transition from accelerometer to gravimeter. The small size and low cost of this MEMS gravimeter suggests many applications in gravity mapping. For example, it could be mounted on a drone instead of low-flying aircraft for distributed land surveying and exploration, deployed to monitor volcanoes, or built into multi-pixel density-contrast imaging arrays.

  3. Surface chemical modification for exceptional wear life of MEMS materials

    Directory of Open Access Journals (Sweden)

    R. Arvind Singh

    2011-12-01

    Full Text Available Micro-Electro-Mechanical-Systems (MEMS are built at micro/nano-scales. At these scales, the interfacial forces are extremely strong. These forces adversely affect the smooth operation and cause wear resulting in the drastic reduction in wear life (useful operating lifetime of actuator-based devices. In this paper, we present a surface chemical modification method that reduces friction and significantly extends the wear life of the two most popular MEMS structural materials namely, silicon and SU-8 polymer. The method includes surface chemical treatment using ethanolamine-sodium phosphate buffer, followed by coating of perfluoropolyether (PFPE nanolubricant on (i silicon coated with SU-8 thin films (500 nm and (ii MEMS process treated SU-8 thick films (50 μm. After the surface chemical modification, it was observed that the steady-state coefficient of friction of the materials reduced by 4 to 5 times and simultaneously their wear durability increased by more than three orders of magnitude (> 1000 times. The significant reduction in the friction coefficients is due to the lubrication effect of PFPE nanolubricant, while the exceptional increase in their wear life is attributed to the bonding between the -OH functional group of ethanolamine treated SU-8 thin/thick films and the -OH functional group of PFPE. The surface chemical modification method acts as a common route to enhance the performance of both silicon and SU-8 polymer. It is time-effective (process time ≤ 11 min, cost-effective and can be readily integrated into MEMS fabrication/assembly processes. It can also work for any kind of structural material from which the miniaturized devices are/can be made.

  4. System-level modeling of MEMS v.10

    CERN Document Server

    Schrag, Gabriele; Hierold, Christofer; Korvink , Jan G

    2012-01-01

    System-level modeling of MEMS - microelectromechanical systems - comprises integrated approaches to simulate, understand, and optimize the performance of sensors, actuators, and microsystems, taking into account the intricacies of the interplay between mechanical and electrical properties, circuitry, packaging, and design considerations. Thereby, system-level modeling overcomes the limitations inherent to methods that focus only on one of these aspects and do not incorporate their mutual dependencies. The book addresses the two most important approaches of system-level modeling, namely physics

  5. Programmable differential capacitance-to-voltage converter for MEMS accelerometers

    Science.gov (United States)

    Royo, G.; Sánchez-Azqueta, C.; Gimeno, C.; Aldea, C.; Celma, S.

    2017-05-01

    Capacitive MEMS sensors exhibit an excellent noise performance, high sensitivity and low power consumption. They offer a huge range of applications, being the accelerometer one of its main uses. In this work, we present the design of a capacitance-to-voltage converter in CMOS technology to measure the acceleration from the capacitance variations. It is based on a low-power, fully-differential transimpedance amplifier with low input impedance and a very low input noise.

  6. Improving Planetary Rover Attitude Estimation via MEMS Sensor Characterization

    Science.gov (United States)

    Hidalgo, Javier; Poulakis, Pantelis; Köhler, Johan; Del-Cerro, Jaime; Barrientos, Antonio

    2012-01-01

    Micro Electro-Mechanical Systems (MEMS) are currently being considered in the space sector due to its suitable level of performance for spacecrafts in terms of mechanical robustness with low power consumption, small mass and size, and significant advantage in system design and accommodation. However, there is still a lack of understanding regarding the performance and testing of these new sensors, especially in planetary robotics. This paper presents what is missing in the field: a complete methodology regarding the characterization and modeling of MEMS sensors with direct application. A reproducible and complete approach including all the intermediate steps, tools and laboratory equipment is described. The process of sensor error characterization and modeling through to the final integration in the sensor fusion scheme is explained with detail. Although the concept of fusion is relatively easy to comprehend, carefully characterizing and filtering sensor information is not an easy task and is essential for good performance. The strength of the approach has been verified with representative tests of novel high-grade MEMS inertia sensors and exemplary planetary rover platforms with promising results. PMID:22438761

  7. A MEMS Based Stencil Lithography Approach to Nanomanufacturing

    Science.gov (United States)

    Barrett, Lawrence; Stark, Thomas; Reeves, Jeremy; Lally, Richard; Bishop, David

    We have developed a microelectromechanical systems (MEMS) based approach to nanomanufacturing called atomic calligraphy. Comb drive actuators position a stencil with sub-nanometer precision and material is deposited through the stencil on to a substrate. The MEMS device is aligned to the substrate using piezoelectric stages and capacitive and resistive measurements. Using the piezo stages in conjunction with the comb drive actuators, increases the writing range from the range of the comb drive actuators ( 10 μm) to the range of the piezo stages (5 cm) without sacrificing resolution. Among the advantages of this method is its scalability. Thousands of MEMS devices can be used to write structures in parallel, and if the stencil on each device contains an array of structures, 106 to 108 structures can be fabricated in parallel. Because there is no wet processing, this technique can be used to fabricate structures on a wide range of materials including many polymers. Arrays of optical metamaterials have been fabricated with this approach and characterized both with scanning electron microscopy (SEM) and optical techniques. This work is funded by the DARPA A2P Program.

  8. Micro packaged MEMS pressure sensor for intracranial pressure measurement

    Science.gov (United States)

    Xiong, Liu; Yan, Yao; Jiahao, Ma; Yanhang, Zhang; Qian, Wang; Zhaohua, Zhang; Tianling, Ren

    2015-06-01

    This paper presents a micro packaged MEMS pressure sensor for intracranial pressure measurement which belongs to BioMEMS. It can be used in lumbar puncture surgery to measure intracranial pressure. Miniaturization is key for lumbar puncture surgery because the sensor must be small enough to allow it be placed in the reagent chamber of the lumbar puncture needle. The size of the sensor is decided by the size of the sensor chip and package. Our sensor chip is based on silicon piezoresistive effect and the size is 400 × 400 μm2. It is much smaller than the reported polymer intracranial pressure sensors such as liquid crystal polymer sensors. In terms of package, the traditional dual in-line package obviously could not match the size need, the minimal size of recently reported MEMS-based intracranial pressure sensors after packaging is 10 × 10 mm2. In this work, we are the first to introduce a quad flat no-lead package as the package form of piezoresistive intracranial pressure sensors, the whole size of the sensor is minimized to only 3 × 3 mm2. Considering the liquid measurement environment, the sensor is gummed and waterproof performance is tested; the sensitivity of the sensor is 0.9 × 10-2 mV/kPa. Project supported by the National Natural Science Foundation of China (Nos. 61025021, 61434001), and the ‘Thousands Talents’ Program for Pioneer Researchers and Its Innovation Team, China.

  9. Hewlett Packard's inkjet MEMS technology: past, present, and future

    Science.gov (United States)

    Stasiak, J.; Richards, S.; Angelos, S.

    2009-05-01

    In 1985, HP introduced the ThinkJet - the first low-cost, mass-produced thermal inkjet printer. Providing a reasonable alternative to noisy dot matrix printers, ThinkJet set the stage for subsequent generations of HP thermal inkjet technology (TIJ). With each new generation, HP TIJ products provided new standards for print quality, color, and an unprecedented cost/performance ratio. Regarded as the first and most successful commercial MEMS technology, the development of HP's TIJ printheads required multidisciplinary innovation in fluid dynamics, bulk and surface micromachining, large-scale integration of electronics, packaging, and high volume MEMS manufacturing. HP's current TIJ printhead products combine Pentium-class addressing circuitry, high voltage mixed-signal driver electronics, dense electrical interconnects, and up to 3900 high-precision microfluidic devices - all on a single silicon chip. In this paper, we will provide a brief history of HP's TIJ technology and discuss how the unique capabilities that were required to advance the state-of-the-art of TIJ printheads are now providing a platform for the development of new MEMS devices and systems.

  10. Friction of different monolayer lubricants in MEMs interfaces.

    Energy Technology Data Exchange (ETDEWEB)

    Carpick, Robert W. (University of Wisconsin, Madison, WI); Street, Mark D. (University of Wisconsin, Madison, WI); Ashurst, William Robert (Auburn University, Auburn, AL); Corwin, Alex David

    2006-01-01

    This report details results from our last year of work (FY2005) on friction in MEMS as funded by the Campaign 6 program for the Microscale Friction project. We have applied different monolayers to a sensitive MEMS friction tester called the nanotractor. The nanotractor is also a useful actuator that can travel {+-}100 {micro}m in 40 nm steps, and is being considered for several MEMS applications. With this tester, we can find static and dynamic coefficients of friction. We can also quantify deviations from Amontons' and Coulomb's friction laws. Because of the huge surface-to-volume ratio at the microscale, surface properties such as adhesion and friction can dominate device performance, and therefore such deviations are important to quantify and understand. We find that static and dynamic friction depend on the monolayer lubricant applied. The friction data can be modeled with a non-zero adhesion force, which represents a deviation from Amontons' Law. Further, we show preliminary data indicating that the adhesion force depends not only on the monolayer, but also on the normal load applied. Finally, we also observe slip deflections before the transition from static to dynamic friction, and find that they depend on the monolayer.

  11. Resonant Magnetic Field Sensors Based On MEMS Technology

    Directory of Open Access Journals (Sweden)

    Elías Manjarrez

    2009-09-01

    Full Text Available Microelectromechanical systems (MEMS technology allows the integration of magnetic field sensors with electronic components, which presents important advantages such as small size, light weight, minimum power consumption, low cost, better sensitivity and high resolution. We present a discussion and review of resonant magnetic field sensors based on MEMS technology. In practice, these sensors exploit the Lorentz force in order to detect external magnetic fields through the displacement of resonant structures, which are measured with optical, capacitive, and piezoresistive sensing techniques. From these, the optical sensing presents immunity to electromagnetic interference (EMI and reduces the read-out electronic complexity. Moreover, piezoresistive sensing requires an easy fabrication process as well as a standard packaging. A description of the operation mechanisms, advantages and drawbacks of each sensor is considered. MEMS magnetic field sensors are a potential alternative for numerous applications, including the automotive industry, military, medical, telecommunications, oceanographic, spatial, and environment science. In addition, future markets will need the development of several sensors on a single chip for measuring different parameters such as the magnetic field, pressure, temperature and acceleration.

  12. Vacuum Packaging of MEMS With Multiple Internal Seal Rings

    Science.gov (United States)

    Hayworth, Ken; Yee, Karl; Shcheglov, Kirill; Bae, Youngsam; Wiberg, Dean; Peay, Chris; Challoner, Anthony

    2008-01-01

    A proposed method of design and fabrication of vacuum-packaged microelectromechanical systems (MEMS) and of individual microelectromechanical devices involves the use of multiple internal seal rings (MISRs) in conjunction with vias (through holes plated with metal for electrical contacts). The proposed method is compatible with mass production in a wafer-level fabrication process, in which the dozens of MEMS or individual microelectromechanical devices on a typical wafer are simultaneously vacuum packaged by bonding a capping wafer before the devices are singulated (cut apart by use of a dicing saw). In addition to being compatible with mass production, the proposed method would eliminate the need for some complex and expensive production steps and would yield more reliable vacuum seals. Conventionally, each MEMS or individual microelectromechanical device is fabricated as one of many identical units on a device wafer. Vacuum packaging is accomplished by bonding the device wafer to a capping wafer with metal seal rings (one ring surrounding each unit) that have been formed on the capping wafer. The electrical leads of each unit are laid out on what would otherwise be a flat surface of the device wafer, against which the seal ring is to be pressed for sealing. The resulting pattern of metal lines and their insulating oxide coverings presents a very rough and uneven surface, upon which it is difficult to pattern the sealing metal. Consequently, the seal is prone to leakage unless additional costly and complex planarization steps are performed before patterning the seal ring and bonding the wafers.

  13. Improving planetary rover attitude estimation via MEMS sensor characterization.

    Science.gov (United States)

    Hidalgo, Javier; Poulakis, Pantelis; Köhler, Johan; Del-Cerro, Jaime; Barrientos, Antonio

    2012-01-01

    Micro Electro-Mechanical Systems (MEMS) are currently being considered in the space sector due to its suitable level of performance for spacecrafts in terms of mechanical robustness with low power consumption, small mass and size, and significant advantage in system design and accommodation. However, there is still a lack of understanding regarding the performance and testing of these new sensors, especially in planetary robotics. This paper presents what is missing in the field: a complete methodology regarding the characterization and modeling of MEMS sensors with direct application. A reproducible and complete approach including all the intermediate steps, tools and laboratory equipment is described. The process of sensor error characterization and modeling through to the final integration in the sensor fusion scheme is explained with detail. Although the concept of fusion is relatively easy to comprehend, carefully characterizing and filtering sensor information is not an easy task and is essential for good performance. The strength of the approach has been verified with representative tests of novel high-grade MEMS inertia sensors and exemplary planetary rover platforms with promising results.

  14. A High Isolation Series-Shunt RF MEMS Switch

    Science.gov (United States)

    Yu, Yuan-Wei; Zhu, Jian; Jia, Shi-Xing; Shi, Yi

    2009-01-01

    This paper presents a wide band compact high isolation microelectromechanical systems (MEMS) switch implemented on a coplanar waveguide (CPW) with three ohmic switch cells, which is based on the series-shunt switch design. The ohmic switch shows a low intrinsic loss of 0.1 dB and an isolation of 24.8 dB at 6 GHz. The measured average pull-in voltage is 28 V and switching time is 47 μs. In order to shorten design period of the high isolation switch, a structure-based small-signal model for the 3-port ohmic MEMS switch is developed and parameters are extracted from the measured results. Then a high isolation switch has been developed where each 3-port ohmic MEMS switch is closely located. The agreement of the measured and modeled radio frequency (RF) performance demonstrates the validity of the electrical equivalent model. Measurements of the series-shunt switch indicate an outstanding isolation of more than 40 dB and a low insertion loss of 0.35 dB from DC to 12 GHz with total chip size of 1 mm × 1.2 mm. PMID:22408535

  15. On electrostatically actuated NEMS/MEMS circular plates

    Science.gov (United States)

    Caruntu, Dumitru I.; Alvarado, Iris

    2011-04-01

    This paper deals with electrostatically actuated micro and nano-electromechanical (MEMS/NEMS) circular plates. The system under investigation consists of two bodies, a deformable and conductive circular plate placed above a fixed, rigid and conductive ground plate. The deformable circular plate is electrostatically actuated by applying an AC voltage between the two plates. Nonlinear parametric resonance and pull-in occur at certain frequencies and relatively large AC voltage, respectively. Such phenomena are useful for applications such as sensors, actuators, switches, micro-pumps, micro-tweezers, chemical and mass sensing, and micro-mirrors. A mathematical model of clamped circular MEMS/NEMS electrostatically actuated plates has been developed. Since the model is in the micro- and nano-scale, surface forces, van der Waals and/or Casimir, acting on the plate are included. A perturbation method, the Method of Multiple Scales (MMS), is used for investigating the case of weakly nonlinear MEMS/NEMS circular plates. Two time scales, fast and slow, are considered in this work. The amplitude-frequency and phase-frequency response of the plate in the case of primary resonance are obtained and discussed.

  16. A miniaturized linear shaker system for MEMS sensor characterization

    Science.gov (United States)

    Encke, Jörg; Hortschitz, Wilfried; Kainz, Andreas; Steiner, Harald; Keplinger, Franz; Sauter, Thilo

    2013-05-01

    A miniaturised, piezoelectrically driven shaker system is presented which is suitable for MEMS characterisation in vacuum. It offers a broad frequency and amplitude range. The fully vacuum compatible shaker is constructed out of one single peace of aluminium with a piezo-stack-actuator working in-plane against four beam springs. It can easily be fabricated at low costs using a hand operated milling machine. The systems characteristics are easily tuned to different applications as the first resonance frequency is given by the stiffness of the beam springs and the mass of the moving shaker table. The utilised piezoelectric stack determines the maximum reachable amplitude for a given spring stiffness. Finite Element simulations have been carried out to design a at transfer characteristic of the shaker up to 10 kHz and amplitudes in the range from sub nanometres up to 1μm. The simulations were evaluated by laser vibrometer measurements of the shaker which also show a good linearity between electrical excitation signal and output deection amplitude. To account for other resonance frequencies introduced by a preexisting MEMS mounting device, the resulting vibration amplitude on the MEMS structure can be normalised by adjusting the electrical excitation amplitude with the help of a Polytec laser vibrometer.

  17. Development of micro-electromechanical system (MEMS) cochlear biomodel

    Energy Technology Data Exchange (ETDEWEB)

    Ngelayang, Thailis Bounya Anak; Latif, Rhonira [Faculty of Electronic and Computer Engineering, Universiti Teknikal Malaysia Melaka, Hang Tuah Jaya, 76100 Durian Tunggal, Melaka (Malaysia)

    2015-05-15

    Human cochlear is undeniably one of the most amazing organs in human body. The functional mechanism is very unique in terms of its ability to convert the sound waves in the form of mechanical vibrations into the electrical nerve impulses. It is known that the normal human auditory system can perceive the audible frequency range between 20 Hz to 20 kHz. Scientists have conducted several researches trying to build the artificial basilar membrane in the human cochlea (cochlear biomodel). Micro-electromechanical system (MEMS) is one of the potential inventions that have the ability to mimic the active behavior of the basilar membrane. In this paper, an array of MEMS bridge beams that are mechanically sensitive to the perceived audible frequency has been proposed. An array of bridge bridge beams with 0.5 µm thickness and length varying from 200 µm to 2000 µm have been designed operate within the audible frequency range. In the bridge beams design, aluminium (Al), copper (Cu), tantalum (Ta) and platinum (Pt) have considered as the material for the bridge beam structure. From the finite element (FE) and lumped element (LE) models of the MEMS bridge beams, platinum has been found to be the best material for the cochlear biomodel design, closely mimicking the basilar membrane.

  18. MEM spectral analysis for predicting influenza epidemics in Japan.

    Science.gov (United States)

    Sumi, Ayako; Kamo, Ken-ichi

    2012-03-01

    The prediction of influenza epidemics has long been the focus of attention in epidemiology and mathematical biology. In this study, we tested whether time series analysis was useful for predicting the incidence of influenza in Japan. The method of time series analysis we used consists of spectral analysis based on the maximum entropy method (MEM) in the frequency domain and the nonlinear least squares method in the time domain. Using this time series analysis, we analyzed the incidence data of influenza in Japan from January 1948 to December 1998; these data are unique in that they covered the periods of pandemics in Japan in 1957, 1968, and 1977. On the basis of the MEM spectral analysis, we identified the periodic modes explaining the underlying variations of the incidence data. The optimum least squares fitting (LSF) curve calculated with the periodic modes reproduced the underlying variation of the incidence data. An extension of the LSF curve could be used to predict the incidence of influenza quantitatively. Our study suggested that MEM spectral analysis would allow us to model temporal variations of influenza epidemics with multiple periodic modes much more effectively than by using the method of conventional time series analysis, which has been used previously to investigate the behavior of temporal variations in influenza data.

  19. High-Q MEMS Resonators for Laser Beam Scanning Displays

    Directory of Open Access Journals (Sweden)

    Ulrich Hofmann

    2012-06-01

    Full Text Available This paper reports on design, fabrication and characterization of high-Q MEMS resonators to be used in optical applications like laser displays and LIDAR range sensors. Stacked vertical comb drives for electrostatic actuation of single-axis scanners and biaxial MEMS mirrors were realized in a dual layer polysilicon SOI process. High Q-factors up to 145,000 have been achieved applying wafer level vacuum packaging technology including deposition of titanium thin film getters. The effective reduction of gas damping allows the MEMS actuator to achieve large amplitudes at high oscillation frequencies while driving voltage and power consumption can be minimized. Exemplarily shown is a micro scanner that achieves a total optical scan angle of 86 degrees at a resonant frequency of 30.8 kHz, which fulfills the requirements for HD720 resolution. Furthermore, results of a new wafer based glass-forming technology for fabrication of three dimensionally shaped glass lids with tilted optical windows are presented.

  20. Design, modeling and simulation of MEMS-based silicon Microneedles

    Science.gov (United States)

    Amin, F.; Ahmed, S.

    2013-06-01

    The advancement in semiconductor process engineering and nano-scale fabrication technology has made it convenient to transport specific biological fluid into or out of human skin with minimum discomfort. Fluid transdermal delivery systems such as Microneedle arrays are one such emerging and exciting Micro-Electro Mechanical System (MEMS) application which could lead to a total painless fluid delivery into skin with controllability and desirable yield. In this study, we aimed to revisit the problem with modeling, design and simulations carried out for MEMS based silicon hollow out of plane microneedle arrays for biomedical applications particularly for transdermal drug delivery. An approximate 200 μm length of microneedle with 40 μm diameter of lumen has been successfully shown formed by isotropic and anisotropic etching techniques using MEMS Pro design tool. These microneedles are arranged in size of 2 × 4 matrix array with center to center spacing of 750 μm. Furthermore, comparisons for fluid flow characteristics through these microneedle channels have been modeled with and without the contribution of the gravitational forces using mathematical models derived from Bernoulli Equation. Physical Process simulations have also been performed on TCAD SILVACO to optimize the design of these microneedles aligned with the standard Si-Fabrication lines.

  1. A High Isolation Series-Shunt RF MEMS Switch

    Directory of Open Access Journals (Sweden)

    Yi Shi

    2009-06-01

    Full Text Available This paper presents a wide band compact high isolation microelectromechanical systems (MEMS switch implemented on a coplanar waveguide (CPW with three ohmic switch cells, which is based on the series-shunt switch design. The ohmic switch shows a low intrinsic loss of 0.1 dB and an isolation of 24.8 dB at 6 GHz. The measured average pull-in voltage is 28 V and switching time is 47 µs. In order to shorten design period of the high isolation switch, a structure-based small-signal model for the 3-port ohmic MEMS switch is developed and parameters are extracted from the measured results. Then a high isolation switch has been developed where each 3-port ohmic MEMS switch is closely located. The agreement of the measured and modeled radio frequency (RF performance demonstrates the validity of the electrical equivalent model. Measurements of the series-shunt switch indicate an outstanding isolation of more than 40 dB and a low insertion loss of 0.35 dB from DC to 12 GHz with total chip size of 1 mm × 1.2 mm.

  2. Low Actuating Voltage Spring-Free RF MEMS SPDT Switch

    Directory of Open Access Journals (Sweden)

    Deepak Bansal

    2016-01-01

    Full Text Available RF MEMS devices are known to be superior to their solid state counterparts in terms of power consumption and electromagnetic response. Major limitations of MEMS devices are their low switching speed, high actuation voltage, larger size, and reliability. In the present paper, a see-saw single pole double throw (SPDT RF MEMS switch based on anchor-free mechanism is proposed which eliminates the above-mentioned disadvantages. The proposed switch has a switching time of 394 nsec with actuation voltage of 5 V. Size of the SPDT switch is reduced by utilizing a single series capacitive switch compared to conventional switches with capacitive and series combinations. Reliability of the switch is improved by adding floating metal and reducing stiction between the actuating bridge and transmission line. Insertion loss and isolation are better than −0.6 dB and −20 dB, respectively, for 1 GHz to 20 GHz applications.

  3. Resonant Magnetic Field Sensors Based On MEMS Technology

    Science.gov (United States)

    Herrera-May, Agustín L.; Aguilera-Cortés, Luz A.; García-Ramírez, Pedro J.; Manjarrez, Elías

    2009-01-01

    Microelectromechanical systems (MEMS) technology allows the integration of magnetic field sensors with electronic components, which presents important advantages such as small size, light weight, minimum power consumption, low cost, better sensitivity and high resolution. We present a discussion and review of resonant magnetic field sensors based on MEMS technology. In practice, these sensors exploit the Lorentz force in order to detect external magnetic fields through the displacement of resonant structures, which are measured with optical, capacitive, and piezoresistive sensing techniques. From these, the optical sensing presents immunity to electromagnetic interference (EMI) and reduces the read-out electronic complexity. Moreover, piezoresistive sensing requires an easy fabrication process as well as a standard packaging. A description of the operation mechanisms, advantages and drawbacks of each sensor is considered. MEMS magnetic field sensors are a potential alternative for numerous applications, including the automotive industry, military, medical, telecommunications, oceanographic, spatial, and environment science. In addition, future markets will need the development of several sensors on a single chip for measuring different parameters such as the magnetic field, pressure, temperature and acceleration. PMID:22408480

  4. Investigation of a delayed feedback controller of MEMS resonators

    KAUST Repository

    Masri, Karim M.

    2013-08-04

    Controlling mechanical systems is an important branch of mechanical engineering. Several techniques have been used to control Microelectromechanical systems (MEMS) resonators. In this paper, we study the effect of a delayed feedback controller on stabilizing MEMS resonators. A delayed feedback velocity controller is implemented through modifying the parallel plate electrostatic force used to excite the resonator into motion. A nonlinear single degree of freedom model is used to simulate the resonator response. Long time integration is used first. Then, a finite deference technique to capture periodic motion combined with the Floquet theory is used to capture the stable and unstable periodic responses. We show that applying a suitable positive gain can stabilize the MEMS resonator near or inside the instability dynamic pull in band. We also study the stability of the resonator by tracking its basins of attraction while sweeping the controller gain and the frequency of excitations. For positive delayed gains, we notice significant enhancement in the safe area of the basins of attraction. Copyright © 2013 by ASME.

  5. 76 FR 13433 - In the Matter of Certain Mems Devices and Products Containing Same; Notice of Commission Decision...

    Science.gov (United States)

    2011-03-11

    ... From the Federal Register Online via the Government Publishing Office INTERNATIONAL TRADE COMMISSION In the Matter of Certain Mems Devices and Products Containing Same; Notice of Commission Decision... United States after importation of certain microelectromechanical systems (``MEMS'') devices and products...

  6. Prospective and retrospective memory in mild Alzheimer's disease Memória prospectiva e retrospectiva na doença de Alzheimer leve

    Directory of Open Access Journals (Sweden)

    Sergilaine Pereira Martins

    2008-06-01

    Full Text Available OBJECTIVE: To study prospective and retrospective memory in patients with mild Alzheimer's disease (AD. METHOD: Twenty mild AD and 20 matched normal control subjects were included. Diagnosis of AD was based on DSM-IV and NINCDS-ADRDA criteria, using CDR 1 and MMSE scores from 16 to 24 for mild AD. All subjects underwent retrospective (Rey Auditory Verbal Learning Test, RAVLT and prospective memory tests (the appointment and belonging subtests of the Rivermead Behavioral Memory Test, RBMT; and two tests made to this study: the clock and the animals test, as well as MMSE, neuropsychological counterproofs, and Cornell Scale for Depression in Dementia. The data was analyzed with Wilcoxon test and Spearman correlation coefficient. RESULTS: AD patients performed worse than controls in prospective and retrospective memory tests, with poorer performance in retrospective memory. There was no correlation between prospective memory and attention, visual perception, executive function, or depression scores. CONCLUSION: Prospective and, in higher degree, retrospective memory are primarily and independently impaired in mild AD.OBJETIVO: Estudar a memória prospectiva e retrospectiva em pacientes com doença de Alzheimer (DA leve. MÉTODO: Vinte pacientes com DA leve e 20 sujeitos controles normais pareados foram incluídos. O diagnóstico de DA baseou-se nos critérios DSM-IV e NINCDS-ADRDA, usando CDR 1 e escores do Mini-Exame Mental de 16 a 24 para DA leve. Todos os sujeitos foram submetidos a testes de memória retrospectiva (Teste de Rey para Aprendizado Auditivo-Verbal e prospectiva (os testes da consulta e do pertence da Bateria Comportamental de Memória do Rivermead; e dois testes desenvolvidos para este estudo: o teste do relógio e o dos animais, bem como a testes cognitivos controles e Escala Cornell de Depressão em Demência. A análise dos dados usou o teste de Wilcoxon e o coeficiente de correlação de Spearman. RESULTADOS: Os pacientes com DA

  7. The 18 mm[superscript 2] Laboratory: Teaching MEMS Development with the SUMMiT Foundry Process

    Science.gov (United States)

    Dallas, T.; Berg, J. M.; Gale, R. O.

    2012-01-01

    This paper describes the goals, pedagogical system, and educational outcomes of a three-semester curriculum in microelectromechanical systems (MEMS). The sequence takes engineering students with no formal MEMS training and gives them the skills to participate in cutting-edge MEMS research and development. The evolution of the curriculum from…

  8. 75 FR 449 - In the Matter of Certain MEMS Devices and Products Containing Same; Notice of Investigation

    Science.gov (United States)

    2010-01-05

    ... Doc No: E9-31360] INTERNATIONAL TRADE COMMISSION [Inv. No. 337-TA-700] In the Matter of Certain MEMS... importation of certain MEMS devices and products containing same by reason of infringement of certain claims... States, the sale for importation, or the sale within the United States after importation of certain MEMS...

  9. 76 FR 28809 - In the Matter of Certain Mems Devices and Products Containing Same; Notice of Commission Decision...

    Science.gov (United States)

    2011-05-18

    ... COMMISSION In the Matter of Certain Mems Devices and Products Containing Same; Notice of Commission Decision... certain microelectromechanical systems (``MEMS'') devices and products containing the same by reason of... relief is a limited exclusion order prohibiting the unlicensed entry of MEMS devices and products...

  10. Moving Towards the Use of New Micro Technology (MEMS) in Greenhouse Climate Related Sensing

    DEFF Research Database (Denmark)

    Andreassen, A.U.; Hyldgaard, Anders; Petersen, Søren D.

    2006-01-01

    is also developing towards new techniques and technologies. A prototype Micro-Electro-Mechanical System (MEMS) dual temperature and light sensor has been compared in experiments with conventional sensors to analyse the reliability, repeatability and usability of both the MEMS dual sensor and the resulting...

  11. Characterization of low temperature deposited atomic layer deposition TiO2 for MEMS applications

    NARCIS (Netherlands)

    Huang, Y.; Pandraud, G.; Sarro, P.M.

    2012-01-01

    TiO2 is an interesting and promising material for micro-/nanoelectromechanical systems (MEMS/NEMS). For high performance and reliable MEMS/NEMS, optimization of the optical characteristics, mechanical stress, and especially surface smoothness of TiO2 is required. To overcome the roughness issue of

  12. Method for spatially modulating X-ray pulses using MEMS-based X-ray optics

    Science.gov (United States)

    Lopez, Daniel; Shenoy, Gopal; Wang, Jin; Walko, Donald A.; Jung, Il-Woong; Mukhopadhyay, Deepkishore

    2015-03-10

    A method and apparatus are provided for spatially modulating X-rays or X-ray pulses using microelectromechanical systems (MEMS) based X-ray optics. A torsionally-oscillating MEMS micromirror and a method of leveraging the grazing-angle reflection property are provided to modulate X-ray pulses with a high-degree of controllability.

  13. Non-Destructive Damping Measurement for Wafer-Level Packaged Microelectromechanical System (MEMS) Acceleration Switches

    Science.gov (United States)

    2014-09-01

    evaluations of MEMS systems required modeling damping by evaluating displacement or oscillation using piezoelectric , electromagnetic, or electrostatic...capacitive sensing) transduction mechanisms.4,5 A previous study determined damping in oscillating cantilever tuning forks by linearizing the Reynolds...acceleration field—when switch closure occurs. Other MEMS devices use transducers like capacitive, piezoelectric , optical, and pressure to discern a

  14. MEMS-based clamp with a passive hold function for precision position retaining of micromanipulators

    NARCIS (Netherlands)

    Brouwer, Dannis Michel; de Jong, B.R.; de Boer, Meint J.; Jansen, Henricus V.; van Dijk, Johannes A.G.M.; van Dijk, Johannes; Krijnen, Gijsbertus J.M.; Soemers, Herman

    2009-01-01

    In this paper the design, modeling and fabrication of a precision MEMS-based clamp with arelatively large clamping force are presented. The purpose of the clamp is to mechanically fixa six-degree-of-freedom (DOF) MEMS-based sample manipulator (Brouwer et al J. Int. Soc. Precis. Eng. Nanotechnol.

  15. Sub-nanometer stable precision MEMS clamping mechanism maintaining clamp force unpowered for TEM application

    NARCIS (Netherlands)

    Brouwer, Dannis Michel; de Jong, B.R.; Soemers, Herman; van Dijk, Johannes

    2006-01-01

    A design is presented for a relatively large force (0.5 mN) high-precision MEMS clamping mechanism. The clamp is a part of a MEMS transmission electron microscope (TEM) sample manipulator, which needs to be fixed unpowered once positioned. The elastic deformation of the clamp suspension has been

  16. Vortex-MEMS filters for wavelength-selective orbital-angular-momentum beam generation

    DEFF Research Database (Denmark)

    Paul, Sujoy; Lyubopytov, Vladimir; Schumann, Martin F.

    2017-01-01

    In this paper an on-chip device capable of wavelength-selective generation of vortex beams is demonstrated. The device is realized by integrating a spiral phase-plate onto a MEMS tunable Fabry-Perot filter. This vortex-MEMS filter, being capable of functioning simultaneously in wavelength...

  17. Performance Evaluation of Three Architectural Variants for Multi-sled MEMS Storage

    NARCIS (Netherlands)

    Khatib, M.G.

    2011-01-01

    MEMS storage technology promises appealing features, such as ultrahigh density and low cost. To stay competitive, however, its performance must improve to fulfil the increasing I/O requirements in first-tier applications. Further, it must be energy-efficient. The maturity of MEMS techniques invites

  18. Load support Improvement on Superhydropobic Surface in Lubracated -MEMS using Numerical Investigation

    NARCIS (Netherlands)

    Muchammad, Muchammad; Tauviqirrahman, Mohammad; Jamari, Jamari; Schipper, Dirk J.

    2015-01-01

    The development of micro-electro-mechanical systems (MEMS) faces a great challenge in commercial application with respect to lubrication issue recently. Short life time of lubricated MEMS is primarily caused by the failure of the lubrication. In this study, the use of superhydrophobic material

  19. A Construção da Memória em José Saramago

    Directory of Open Access Journals (Sweden)

    Gisele Ambrósio Gomes

    2010-07-01

    Full Text Available O presente artigo tem por objetivo analisar a elaboração das memórias de infância e de adolescência do escritor José Saramago através da escrita autobiográfica encontrada em seu livro intitulado As Pequenas Memórias.

  20. Batalhas de Memória: uma proposta de leitura de Flávio Josefo

    OpenAIRE

    Degan, Alex

    2011-01-01

    Este artigo propõe uma leitura das obras do historiador Flávio Josefo destacando os vínculos entre História, Memória e Judaísmo, conferindo especial atençáo ao conceito de memória cultural desenvolvido por Jan Assmann. 

  1. Optimizing MEMS-Based Storage Devices for Mobile Battery-Powered Systems

    NARCIS (Netherlands)

    Khatib, M.G.; Hartel, Pieter H.

    An emerging storage technology, called MEMS-based storage, promises nonvolatile storage devices with ultrahigh density, high rigidity, a small form factor, and low cost. For these reasons, MEMS-based storage devices are suitable for battery-powered mobile systems such as PDAs. For deployment in such

  2. Design and analysis of MEMS MWCNT/epoxy strain sensor using ...

    Indian Academy of Sciences (India)

    2017-06-20

    Jun 20, 2017 ... Home; Journals; Pramana – Journal of Physics; Volume 89; Issue 1. Design and analysis of MEMS MWCNT/epoxy strain sensor using COMSOL. GAURAV ... The design and performance of piezoresistive MEMS-based MWCNT/epoxy composite strain sensor using COMSOL Multiphysics Toolbox has been ...

  3. Fast Configuration of MEMS-Based Storage Devices for Streaming Applications

    NARCIS (Netherlands)

    Khatib, M.G.; van Dijk, H.W.

    2009-01-01

    An exciting class of storage devices is emerging: the class of Micro-Electro-Mechanical storage Systems (MEMS). Properties of MEMS-based storage devices include high density, small form factor, and low power. The use of this type of devices in mobile infotainment systems, such as video cameras is

  4. Some studies on the deformation of the membrane in an RF MEMS switch

    NARCIS (Netherlands)

    Ambati, V.R.; Asheim, A.; van den Berg, J.B.; van Gennip, Y.; Gerasimov, T.; Hlod, A.; Planqué, B.; van der Schans, M.; van der Stelt, S.; Vargas Rivera, M.; Vondenhoff, E.; Bokhove, O.; Bokhove, Onno; Hurink, J.L.; Hurink, Johann L.; Meinsma, G.; Meinsma, Gjerrit; Stolk, C.C.; Vellekoop, M.H.

    2008-01-01

    Radio Frequency (RF) switches of Micro Electro Mechanical Systems (MEMS) are appealing to the mobile industry because of their energy efficiency and ability to accommodate more frequency bands. However, the electromechanical coupling of the electrical circuit to the mechanical components in RF MEMS

  5. Characterization and reliability studies towards piezoelectrically actuated RF-MEMS switches

    NARCIS (Netherlands)

    Wang, Jiahui

    2017-01-01

    This PhD research aims to develop high density piezoelectric RF-MEMS switch arrays to be integrated in an energy-efficient agile RF transceiver with reconfigurable antenna. According to the comparison of performance criteria for various RF-MEMS switches, the galvanic switches are broadband and have

  6. Micro-electro-mechanical systems (MEMS: Technology for the 21st century

    Directory of Open Access Journals (Sweden)

    Đakov Tatjana A.

    2014-01-01

    Full Text Available Micro-electro-mechanical systems (MEMS are miniturized devices that can sense the environment, process and analyze information, and respond with a variety of mechanical and electrical actuators. MEMS consists of mechanical elements, sensors, actuators, electrical and electronics devices on a common silicon substrate. Micro-electro-mechanical systems are becoming a vital technology for modern society. Some of the advantages of MEMS devices are: very small size, very low power consumption, low cost, easy to integrate into systems or modify, small thermal constant, high resistance to vibration, shock and radiation, batch fabricated in large arrays, improved thermal expansion tolerance. MEMS technology is increasingly penetrating into our lives and improving quality of life, similar to what we experienced in the microelectronics revolution. Commercial opportunities for MEMS are rapidly growing in broad application areas, including biomedical, telecommunication, security, entertainment, aerospace, and more in both the consumer and industrial sectors on a global scale. As a breakthrough technology, MEMS is building synergy between previously unrelated fields such as biology and microelectronics. Many new MEMS and nanotechnology applications will emerge, expanding beyond that which is currently identified or known. MEMS are definitely technology for 21st century.

  7. Avaliação do conforto térmico no aprendizado: estudo de caso sobre influência na atenção e memória Evaluation of thermal comfort in learning: study case about the influence in attention and memorization

    Directory of Open Access Journals (Sweden)

    Eduardo Concepción Batiz

    2009-01-01

    Full Text Available O conforto térmico, cujo avaliação é um processo de caráter psicofisiológico, busca adaptar o ambiente para que este ofereça melhores condições de saúde, segurança, rendimento e bem-estar. Este artigo verifica a relação entre conforto térmico na sala de aula universitária e o rendimento da atenção e da memória dos estudantes. Métodos de avaliação objetivos e subjetivos foram aplicados nessa verificação, como o questionário baseado no modelo proposto por Batiz e Goedert, o teste das figuras de Rey e o cálculo do PMV e PPD pelas expressões de Fanger. Constatou-se uma coincidência da ordem de 90,9% entre o PMV calculado pelas equações de Fanger e a avaliação subjetiva medida pela aplicação do questionário, demonstrando que o questionário é uma ferramenta efetiva para avaliação do conforto térmico. Constatou-se que 70% dos avaliados obtiveram resultados positivos no teste de atenção e memória. Todos os alunos que estavam em condição de conforto apresentaram resultados positivos.Thermal comfort is a psycho-physiological phenomenon that looks to environmental adaptations to provide better health conditions, and levels of safety, performance and comfort. This article examines the relationship between thermal comfort in university classrooms with students' attention and recall performance. Objective and subjective evaluation methods were applied, such as a questionnaire based on the proposed model by Batiz and Goedert, Figure of Rey Method and Fanger Method. It was observed that there is a 90.9 per cent coincidence between the PMV calculated and the subjective value measured. It shows that the questionnaire is an effective tool for evaluating thermal comfort. It was observed that 70 per cent of the students evaluated manifested a positive output in attention and memory tests. Positive results were obtained in the test by students in comfortable conditions.

  8. On Orbit Immuno-Based, Label-Free, White Blood Cell Counting System with MicroElectroMechanical Sensor (MEMS) Technology (OILWBCS-MEMS) Project

    Data.gov (United States)

    National Aeronautics and Space Administration — Aurora Flight Sciences Corporation and partner, Draper Laboratory, propose to develop an on-orbit immuno-based label-free white blood cell counting system using MEMS...

  9. Shock reliability enhancement for MEMS vibration energy harvesters with nonlinear air damping as a soft stopper

    Science.gov (United States)

    Chen, Shao-Tuan; Du, Sijun; Arroyo, Emmanuelle; Jia, Yu; Seshia, Ashwin

    2017-10-01

    This paper presents a novel application of utilising nonlinear air damping as a soft mechanical stopper to increase the shock reliability for microelectromechanical systems (MEMS) vibration energy harvesters. The theoretical framework for nonlinear air damping is constructed for MEMS vibration energy harvesters operating in different air pressure levels, and characterisation experiments are conducted to establish the relationship between air pressure and nonlinear air damping coefficient for rectangular cantilever MEMS micro cantilevers with different proof masses. Design guidelines on choosing the optimal air pressure level for different MEMS vibration energy harvesters based on the trade-off between harvestable energy and the device robustness are presented, and random excitation experiments are performed to verify the robustness of MEMS vibration energy harvesters with nonlinear air damping as soft stoppers to limit the maximum deflection distance and increase the shock reliability of the device.

  10. Os mecanismos da memória na construção do pensamento musical

    OpenAIRE

    Flávia Garcia Rizzon

    2009-01-01

    O presente trabalho pesquisa sobre a construção da memória musical com embasamento na Epistemologia Genética de Jean Piaget. A fundamentação teórica está estruturada sobre a explicação dos diversos fatores intervenientes na construção da memória. A partir deles, destacam-se as relações existentes entre a memória, a representação e as imagens mentais, especificamente as imagens aurais. Aborda-se o funcionamento da memória mostrando seus aspectos fisiológicos, os tipos de memória e o conceito d...

  11. NSF/AFOSR/ASME Workshop on Tribology Issues and Opportunities in MEMS

    CERN Document Server

    1998-01-01

    Micro Electro Mechanical Systems (MEMS) is already about a billion dollars a year industry and is growing rapidly. So far major emphasis has been placed on the fabrication processes for various devices. There are serious issues related to tribology, mechanics, surfacechemistry and materials science in the operationand manufacturingof many MEMS devices and these issues are preventing an even faster commercialization. Very little is understood about tribology and mechanical properties on micro- to nanoscales of the materials used in the construction of MEMS devices. The MEMS community needs to be exposed to the state-of-the-artoftribology and vice versa. Fundamental understanding of friction/stiction, wear and the role of surface contamination and environmental debris in micro devices is required. There are significantadhesion, friction and wear issues in manufacturing and actual use, facing the MEMS industry. Very little is understood about the tribology of bulk silicon and polysilicon films used in the constr...

  12. Fotografia, Memória e Arte. Sobras de Geraldo de Barros

    OpenAIRE

    Pereira Gonçalves, Sandra Maria Lúcia

    2011-01-01

    O presente artigo reflete acerca das relações que se estabelecem entre a fotografia e a memória, e no caso específico da série fotográfica Sobras, de Geraldo de Barros, que inspira este trabalho, a transformação dessa matéria (fotografia e memória) em objeto artístico. Três são os eixos temáticos trabalhados: fotografia, memória e arte. Para refletir acerca da relação entre memória e fotografia a perspectiva teórica é bergsoniana. A relação entre percepção e memória será abordada e a partir d...

  13. Modelling MEMS deformable mirrors for astronomical adaptive optics

    Science.gov (United States)

    Blain, Celia

    As of July 2012, 777 exoplanets have been discovered utilizing mainly indirect detection techniques. The direct imaging of exoplanets is the next goal for astronomers, because it will reveal the diversity of planets and planetary systems, and will give access to the exoplanet's chemical composition via spectroscopy. With this spectroscopic knowledge, astronomers will be able to know, if a planet is terrestrial and, possibly, even find evidence of life. With so much potential, this branch of astronomy has also captivated the general public attention. The direct imaging of exoplanets remains a challenging task, due to (i) the extremely high contrast between the parent star and the orbiting exoplanet and (ii) their small angular separation. For ground-based observatories, this task is made even more difficult, due to the presence of atmospheric turbulence. High Contrast Imaging (HCI) instruments have been designed to meet this challenge. HCI instruments are usually composed of a coronagraph coupled with the full onaxis corrective capability of an Extreme Adaptive Optics (ExAO) system. An efficient coronagraph separates the faint planet's light from the much brighter starlight, but the dynamic boiling speckles, created by the stellar image, make exoplanet detection impossible without the help of a wavefront correction device. The Subaru Coronagraphic Extreme Adaptive Optics (SCExAO) system is a high performance HCI instrument developed at Subaru Telescope. The wavefront control system of SCExAO consists of three wavefront sensors (WFS) coupled with a 1024- actuator Micro-Electro-Mechanical-System (MEMS) deformable mirror (DM). MEMS DMs offer a large actuator density, allowing high count DMs to be deployed in small size beams. Therefore, MEMS DMs are an attractive technology for Adaptive Optics (AO) systems and are particularly well suited for HCI instruments employing ExAO technologies. SCExAO uses coherent light modulation in the focal plane introduced by the DM, for

  14. MEMS (Micro-Electro-Mechanical Systems) for Automotive and Consumer Electronics

    Science.gov (United States)

    Marek, Jiri; Gómez, Udo-Martin

    MEMS sensors gained over the last two decades an impressive width of applications: (a) ESP: A car is skidding and stabilizes itself without driver intervention (b) Free-fall detection: A laptop falls to the floor and protects the hard drive by parking the read/write drive head automatically before impact. (c) Airbag: An airbag fires before the driver/occupant involved in an impending automotive crash impacts the steering wheel, thereby significantly reducing physical injury risk. MEMS sensors are sensing the environmental conditions and are giving input to electronic control systems. These crucial MEMS sensors are making system reactions to human needs more intelligent, precise, and at much faster reaction rates than humanly possible. Important prerequisites for the success of sensors are their size, functionality, power consumption, and costs. This technical progress in sensor development is realized by micro-machining. The development of these processes was the breakthrough to industrial mass-production for micro-electro-mechanical systems (MEMS). Besides leading-edge micromechanical processes, innovative and robust ASIC designs, thorough simulations of the electrical and mechanical behaviour, a deep understanding of the interactions (mainly over temperature and lifetime) of the package and the mechanical structures are needed. This was achieved over the last 20 years by intense and successful development activities combined with the experience of volume production of billions of sensors. This chapter gives an overview of current MEMS technology, its applications and the market share. The MEMS processes are described, and the challenges of MEMS, compared to standard IC fabrication, are discussed. The evolution of MEMS requirements is presented, and a short survey of MEMS applications is shown. Concepts of newest inertial sensors for ESP-systems are given with an emphasis on the design concepts of the sensing element and the evaluation circuit for achieving

  15. Molecular mechanism for the action of the anti-CD44 monoclonal antibody MEM-85.

    Science.gov (United States)

    Škerlová, Jana; Král, Vlastimil; Kachala, Michael; Fábry, Milan; Bumba, Ladislav; Svergun, Dmitri I; Tošner, Zdeněk; Veverka, Václav; Řezáčová, Pavlína

    2015-08-01

    The hyaluronate receptor CD44 plays role in cell adhesion and migration and is involved in tumor metastasis. The extracellular domain of CD44 comprises the hyaluronate-binding domain (HABD) and the membrane-proximal stem region; the short intracellular portion interacts with adaptor proteins and triggers signaling pathways. Binding of hyaluronate to CD44 HABD induces an allosteric conformational change, which results in CD44 shedding. A poorly characterized epitope in human CD44 HABD is recognized by the murine monoclonal antibody MEM-85, which cross-blocks hyaluronate binding to CD44 and also induces CD44 shedding. MEM-85 is of therapeutic interest, as it inhibits growth of lung cancer cells in murine models. In this work, we employed a combination of biophysical methods to determine the MEM-85 binding epitope in CD44 HABD and to provide detailed insight into the mechanism of MEM-85 action. In particular, we constructed a single-chain variable fragment (scFv) of MEM-85 as a tool for detailed characterization of the CD44 HABD-antibody complex and identified residues within CD44 HABD involved in the interaction with scFv MEM-85 by NMR spectroscopy and mutational analysis. In addition, we built a rigid body model of the CD44 HABD-scFv MEM-85 complex using a low-resolution structure obtained by small-angle X-ray scattering. The MEM-85 epitope is situated in the C-terminal part of CD44 HABD, rather than the hyaluronate-binding groove, and the binding of MEM-85 induces a structural reorganization similar to that induced by hyaluronate. Therefore, the mechanism of MEM-85 cross-blocking of hyaluronate binding is likely of an allosteric, relay-like nature. Copyright © 2015 Elsevier Inc. All rights reserved.

  16. Low concentrations of MEM vitamins during in vitro maturation of porcine oocytes improves subsequent parthenogenetic development.

    Science.gov (United States)

    Naruse, Kenji; Kim, Hong Rye; Shin, Young Min; Chang, Suk Min; Lee, Hye Ran; Park, Chang Sik; Jin, Dong Il

    2007-01-15

    To investigate the effects of water-soluble vitamin supplementation for IVM/IVC of porcine oocytes and evaluate maturation and developmental capacity in vitro, porcine cumulus oocyte complexes (COCs) was matured in NCSU-23-based medium with water-soluble vitamins for 44 h and then cultured in PZM-3 for 7 days following activation. The COCs were allocated into five treatment groups and matured in various concentrations of MEM vitamins (control, 0.05, 0.1, 0.2, 0.4, and 1x). Metaphase II plates of the cumulus-free oocytes were observed following Hoechest 33258 staining. The COCs were allocated into four treatment groups, matured in various concentrations of MEM vitamins (control, 0.05, 0.1, 0.2, and 0.4x) and cultured in PZM-3 following activation. Also, COCS were matured without MEM vitamins and cultured in PZM-3 with various concentrations (control, 0.1, 0.4, 1.0, and 2.0 x) of MEM vitamins. Furthermore, 2 x 2 factorial (IVM/IVC) experiments were performed in IVM medium with or without 0.05 x MEM vitamins and IVC medium with or without 0.4x MEM vitamins to examine the in vitro development of parthenogenetic embryos. Maturation rates of COCs treated with MEM vitamins did not differ significantly among groups. However, compared to the control group, oocytes matured with the addition of 0.05 x MEM vitamins developed to blastocysts at a higher percentage (PMEM vitamins. Total cell number of blastocysts was significantly higher in the 0.05 x group. Addition of 0.4x MEM vitamins decreased (PMEM vitamins-treated group. In contrast, addition of vitamins to PZM-3 medium for in vitro culture of activated porcine oocytes did not affect development. In conclusion, addition of a low concentration of MEM vitamins to IVM medium for porcine oocytes enhanced subsequent development and improved embryo quality.

  17. MEMS capacitive accelerometer-based middle ear microphone.

    Science.gov (United States)

    Young, Darrin J; Zurcher, Mark A; Semaan, Maroun; Megerian, Cliff A; Ko, Wen H

    2012-12-01

    The design, implementation, and characterization of a microelectromechanical systems (MEMS) capacitive accelerometer-based middle ear microphone are presented in this paper. The microphone is intended for middle ear hearing aids as well as future fully implantable cochlear prosthesis. Human temporal bones acoustic response characterization results are used to derive the accelerometer design requirements. The prototype accelerometer is fabricated in a commercial silicon-on-insulator (SOI) MEMS process. The sensor occupies a sensing area of 1 mm × 1 mm with a chip area of 2 mm × 2.4 mm and is interfaced with a custom-designed low-noise electronic IC chip over a flexible substrate. The packaged sensor unit occupies an area of 2.5 mm × 6.2 mm with a weight of 25 mg. The sensor unit attached to umbo can detect a sound pressure level (SPL) of 60 dB at 500 Hz, 35 dB at 2 kHz, and 57 dB at 8 kHz. An improved sound detection limit of 34-dB SPL at 150 Hz and 24-dB SPL at 500 Hz can be expected by employing start-of-the-art MEMS fabrication technology, which results in an articulation index of approximately 0.76. Further micro/nanofabrication technology advancement is needed to enhance the microphone sensitivity for improved understanding of normal conversational speech.

  18. Fabrication of 3D Carbon Microelectromechanical Systems (C-MEMS).

    Science.gov (United States)

    Pramanick, Bidhan; Martinez-Chapa, Sergio O; Madou, Marc; Hwang, Hyundoo

    2017-06-17

    A wide range of carbon sources are available in nature, with a variety of micro-/nanostructure configurations. Here, a novel technique to fabricate long and hollow glassy carbon microfibers derived from human hairs is introduced. The long and hollow carbon structures were made by the pyrolysis of human hair at 900 °C in a N2 atmosphere. The morphology and chemical composition of natural and pyrolyzed human hairs were investigated using scanning electron microscopy (SEM) and electron-dispersive X-ray spectroscopy (EDX), respectively, to estimate the physical and chemical changes due to pyrolysis. Raman spectroscopy was used to confirm the glassy nature of the carbon microstructures. Pyrolyzed hair carbon was introduced to modify screen-printed carbon electrodes ; the modified electrodes were then applied to the electrochemical sensing of dopamine and ascorbic acid. Sensing performance of the modified sensors was improved as compared to the unmodified sensors. To obtain the desired carbon structure design, carbon micro-/nanoelectromechanical system (C-MEMS/C-NEMS) technology was developed. The most common C-MEMS/C-NEMS fabrication process consists of two steps: (i) the patterning of a carbon-rich base material, such as a photosensitive polymer, using photolithography; and (ii) carbonization through the pyrolysis of the patterned polymer in an oxygen-free environment. The C-MEMS/NEMS process has been widely used to develop microelectronic devices for various applications, including in micro-batteries, supercapacitors, glucose sensors, gas sensors, fuel cells, and triboelectric nanogenerators. Here, recent developments of a high-aspect ratio solid and hollow carbon microstructures with SU8 photoresists are discussed. The structural shrinkage during pyrolysis was investigated using confocal microscopy and SEM. Raman spectroscopy was used to confirm the crystallinity of the structure, and the atomic percentage of the elements present in the material before and after

  19. Validation of thermal models for a prototypical MEMS thermal actuator.

    Energy Technology Data Exchange (ETDEWEB)

    Gallis, Michail A.; Torczynski, John Robert; Piekos, Edward Stanley; Serrano, Justin Raymond; Gorby, Allen D.; Phinney, Leslie Mary

    2008-09-01

    This report documents technical work performed to complete the ASC Level 2 Milestone 2841: validation of thermal models for a prototypical MEMS thermal actuator. This effort requires completion of the following task: the comparison between calculated and measured temperature profiles of a heated stationary microbeam in air. Such heated microbeams are prototypical structures in virtually all electrically driven microscale thermal actuators. This task is divided into four major subtasks. (1) Perform validation experiments on prototypical heated stationary microbeams in which material properties such as thermal conductivity and electrical resistivity are measured if not known and temperature profiles along the beams are measured as a function of electrical power and gas pressure. (2) Develop a noncontinuum gas-phase heat-transfer model for typical MEMS situations including effects such as temperature discontinuities at gas-solid interfaces across which heat is flowing, and incorporate this model into the ASC FEM heat-conduction code Calore to enable it to simulate these effects with good accuracy. (3) Develop a noncontinuum solid-phase heat transfer model for typical MEMS situations including an effective thermal conductivity that depends on device geometry and grain size, and incorporate this model into the FEM heat-conduction code Calore to enable it to simulate these effects with good accuracy. (4) Perform combined gas-solid heat-transfer simulations using Calore with these models for the experimentally investigated devices, and compare simulation and experimental temperature profiles to assess model accuracy. These subtasks have been completed successfully, thereby completing the milestone task. Model and experimental temperature profiles are found to be in reasonable agreement for all cases examined. Modest systematic differences appear to be related to uncertainties in the geometric dimensions of the test structures and in the thermal conductivity of the

  20. A MEMS vibration energy harvester for automotive applications

    Science.gov (United States)

    van Schaijk, R.; Elfrink, R.; Oudenhoven, J.; Pop, V.; Wang, Z.; Renaud, M.

    2013-05-01

    The objective of this work is to develop MEMS vibration energy harvesters for tire pressure monitoring systems (TPMS), they can be located on the rim or on the inner-liner of the car tire. Nowadays TPMS modules are powered by batteries with a limited lifetime. A large effort is ongoing to replace batteries with small and long lasting power sources like energy harvesters [1]. The operation principle of vibration harvesters is mechanical resonance of a seismic mass, where mechanical energy is converted into electrical energy. In general, vibration energy harvesters are of specific interest for machine environments where random noise or repetitive shock vibrations are present. In this work we present the results for MEMS based vibration energy harvesting for applying on the rim or inner-liner. The vibrations on the rim correspond to random noise. A vibration energy harvester can be described as an under damped mass-spring system acting like a mechanical band-pass filter, and will resonate at its natural frequency [2]. At 0.01 g2/Hz noise amplitude the average power can reach the level that is required to power a simple wireless sensor node, approximately 10 μW [3]. The dominant vibrations on the inner-liner consist mainly of repetitive high amplitude shocks. With a shock, the seismic mass is displaced, after which the mass will "ring-down" at its natural resonance frequency. During the ring-down period, part of the mechanical energy is harvested. On the inner-liner of the tire repetitive (one per rotation) high amplitude (few hundred g) shocks occur. The harvester enables an average power of a few tens of μW [4], sufficient to power a more sophisticated wireless sensor node that can measure additional tire-parameters besides pressure. In this work we characterized MEMS vibration energy harvesters for noise and shock excitation. We validated their potential for TPMS modules by measurements and simulation.

  1. Development of scanning holographic display using MEMS SLM

    Science.gov (United States)

    Takaki, Yasuhiro

    2016-10-01

    Holography is an ideal three-dimensional (3D) display technique, because it produces 3D images that naturally satisfy human 3D perception including physiological and psychological factors. However, its electronic implementation is quite challenging because ultra-high resolution is required for display devices to provide sufficient screen size and viewing zone. We have developed holographic display techniques to enlarge the screen size and the viewing zone by use of microelectromechanical systems spatial light modulators (MEMS-SLMs). Because MEMS-SLMs can generate hologram patterns at a high frame rate, the time-multiplexing technique is utilized to virtually increase the resolution. Three kinds of scanning systems have been combined with MEMS-SLMs; the screen scanning system, the viewing-zone scanning system, and the 360-degree scanning system. The screen scanning system reduces the hologram size to enlarge the viewing zone and the reduced hologram patterns are scanned on the screen to increase the screen size: the color display system with a screen size of 6.2 in. and a viewing zone angle of 11° was demonstrated. The viewing-zone scanning system increases the screen size and the reduced viewing zone is scanned to enlarge the viewing zone: a screen size of 2.0 in. and a viewing zone angle of 40° were achieved. The two-channel system increased the screen size to 7.4 in. The 360-degree scanning increases the screen size and the reduced viewing zone is scanned circularly: the display system having a flat screen with a diameter of 100 mm was demonstrated, which generates 3D images viewed from any direction around the flat screen.

  2. Update on MEMS-based scanned beam imager

    Science.gov (United States)

    James, Richard; Gibson, Greg; Metting, Frank; Davis, Wyatt; Drabe, Christian

    2007-01-01

    In 2004, Microvision presented "Scanned Beam Medical Imager" as an introduction to our MEMS-based, full color scanned beam imaging system. This presentation will provide an update of the technological advancements since this initial work from 2004. This recent work includes the development of functional prototypes that are much smaller than previous prototypes using a design architecture that is easily scalable. Performance has been significantly improved by increasing the optical field of views and video refresh rate. Real-time image processing capabilities have been developed to enhance the image quality and functionality over a wide range of operating conditions. Actual images of various objects will be presented.

  3. Pulse Reversal Plating of Nickel and Nickel Alloys for MEMS

    DEFF Research Database (Denmark)

    Tang, Peter Torben

    2001-01-01

    Pulse plating has previously been reported to improve the properties of nickel and nickel alloy deposits. Typically, focus has been on properties such as grain size, hardness and smoothness. When pulse plating is to be utilized for micro electromechanical systems (MEMS), internal stress...... and material distribution is even more important. Using a bath consisting mostly of nickel chloride, pulse reversal plating of both pure nickel and nickel-cobalt alloys has been used to fabricate tools for micro-injection molding. Pulse reversal plating of ternary soft-magnetic alloys, comprising 45-65 percent...

  4. MEMS fabricated energy harvesting device with 2D resonant structure

    DEFF Research Database (Denmark)

    Crovetto, Andrea; Wang, Fei; Triches, Marco

    This paper reports on a MEMS energy harvester able to generate power from two perpendicular ambient vibration directions. CYTOP polymer is used both as the electret material for electrostatic transduction and as a bonding interface for low-temperature wafer bonding. With final chip size of ~1 cm2......, an output power of 32.5 nW is reached with an external load of 17 MΩ, under a harmonic source motion with acceleration RMS amplitude 0.03 g (0.3 m/s2) and frequency 179 Hz....

  5. Nonlinear Parameter Identification of a Resonant Electrostatic MEMS Actuator

    Science.gov (United States)

    Al-Ghamdi, Majed S.; Alneamy, Ayman M.; Park, Sangtak; Li, Beichen; Khater, Mahmoud E.; Abdel-Rahman, Eihab M.; Heppler, Glenn R.; Yavuz, Mustafa

    2017-01-01

    We experimentally investigate the primary superharmonic of order two and subharmonic of order one-half resonances of an electrostatic MEMS actuator under direct excitation. We identify the parameters of a one degree of freedom (1-DOF) generalized Duffing oscillator model representing it. The experiments were conducted in soft vacuum to reduce squeeze-film damping, and the actuator response was measured optically using a laser vibrometer. The predictions of the identified model were found to be in close agreement with the experimental results. We also identified the noise spectral density of process (actuation voltage) and measurement noise. PMID:28505097

  6. A MEMS-based high frequency x-ray chopper

    Energy Technology Data Exchange (ETDEWEB)

    Siria, A; Schwartz, W; Chevrier, J [Institut Neel, CNRS-Universite Joseph Fourier Grenoble, BP 166, F-38042 Grenoble Cedex 9 (France); Dhez, O; Comin, F [ESRF, 6 rue Jules Horowitz, F-38043 Grenoble Cedex 9 (France); Torricelli, G [Department of Physics and Astronomy, University of Leicester, University Road, Leicester LE1 7RH (United Kingdom)

    2009-04-29

    Time-resolved x-ray experiments require intensity modulation at high frequencies (advanced rotating choppers have nowadays reached the kHz range). We here demonstrate that a silicon microlever oscillating at 13 kHz with nanometric amplitude can be used as a high frequency x-ray chopper. We claim that using micro-and nanoelectromechanical systems (MEMS and NEMS), it will be possible to achieve higher frequencies in excess of hundreds of megahertz. Working at such a frequency can open a wealth of possibilities in chemistry, biology and physics time-resolved experiments.

  7. MEMS-based thick film PZT vibrational energy harvester

    DEFF Research Database (Denmark)

    Lei, Anders; Xu, Ruichao; Thyssen, Anders

    2011-01-01

    We present a MEMS-based unimorph silicon/PZT thick film vibrational energy harvester with an integrated proof mass. We have developed a process that allows fabrication of high performance silicon based energy harvesters with a yield higher than 90%. The process comprises a KOH etch using...... a mechanical front side protection of an SOI wafer with screen printed PZT thick film. The fabricated harvester device produces 14.0 μW with an optimal resistive load of 100 kΩ from 1g (g=9.81 m s-2) input acceleration at its resonant frequency of 235 Hz....

  8. Capacitive MEMS accelerometers for measuring high-g accelerations

    Science.gov (United States)

    Baginsky, I. L.; Kostsov, E. G.

    2017-05-01

    A possibility of creating a capacitive accelerometer for measuring high- g accelerations (up to 106 g and higher) is discussed. It is demonstrated that insertion of a thin electret film with a high surface potential into the gap between the electrodes ensures significant expansion of the frequency and amplitude ranges of acceleration measurements, whereas the size of the proposed device is smaller than that of available MEMS accelerometers for measuring high- g accelerations. A mathematical model of an electret accelerometer for high- g accelerations is developed, and the main specific features of accelerometer operation are analyzed.

  9. Nonlinear Parameter Identification of a Resonant Electrostatic MEMS Actuator.

    Science.gov (United States)

    Al-Ghamdi, Majed S; Alneamy, Ayman M; Park, Sangtak; Li, Beichen; Khater, Mahmoud E; Abdel-Rahman, Eihab M; Heppler, Glenn R; Yavuz, Mustafa

    2017-05-13

    We experimentally investigate the primary superharmonic of order two and subharmonic of order one-half resonances of an electrostatic MEMS actuator under direct excitation. We identify the parameters of a one degree of freedom (1-DOF) generalized Duffing oscillator model representing it. The experiments were conducted in soft vacuum to reduce squeeze-film damping, and the actuator response was measured optically using a laser vibrometer. The predictions of the identified model were found to be in close agreement with the experimental results. We also identified the noise spectral density of process (actuation voltage) and measurement noise.

  10. Parameter identification from frequency response of MEMS energy harvesters

    Science.gov (United States)

    Truong, Binh Duc; Le, Cuong Phu; Halvorsen, Einar

    2017-06-01

    In this study, we present theoretical analysis and numerical results on a simple technique for extracting unknown model parameters for MEMS electrostatic energy harvesters. We show that the frequency response can be utilized in a least-squares minimization scheme to estimate the damping coefficient, mechanical stiffness and transducer/load parasitic capacitances. The accuracy of the method is tested by application to simulated cases of linear and non-linear harvesters. A single data sweep from such a pseudo-experiment suffices to determine the unknown parameters of the electromechanical model with accuracy. The method is shown to work satisfactorily for both linear and nonlinear devices.

  11. Compact multichannel MEMS based spectrometer for FBG sensing

    DEFF Research Database (Denmark)

    Ganziy, Denis; Rose, Bjarke; Bang, Ole

    2017-01-01

    We propose a novel type of compact multichannel MEMS based spectrometer, where we replace the linear detector with a Digital Micromirror Device (DMD). The DMD is typically cheaper and has better pixel sampling than an InGaAs detector used in the 1550 nm range, which leads to cost reduction...... and better performance. Moreover, the DMD is a 2D array, which means that multichannel systems can be implemented without any additional optical components in the spectrometer. This makes the proposed interrogator highly cost-effective. The digital nature of the DMD also provides opportunities for advanced...

  12. Compact multichannel MEMS based spectrometer for FBG sensing

    Science.gov (United States)

    Ganziy, D.; Rose, B.; Bang, O.

    2017-04-01

    We propose a novel type of compact multichannel MEMS based spectrometer, where we replace the linear detector with a Digital Micromirror Device (DMD). The DMD is typically cheaper and has better pixel sampling than an InGaAs detector used in the 1550 nm range, which leads to cost reduction and better performance. Moreover, the DMD is a 2D array, which means that multichannel systems can be implemented without any additional optical components in the spectrometer. This makes the proposed interrogator highly cost-effective. The digital nature of the DMD also provides opportunities for advanced programmable spectroscopy.

  13. Intelligent MEMS spectral sensor for NIR applications (Conference Presentation)

    Science.gov (United States)

    Kantojärvi, Uula; Antila, Jarkko E.; Mäkynen, Jussi; Suhonen, Janne

    2017-05-01

    Near Infrared (NIR) spectrometers have been widely used in many material inspection applications, but mainly in central laboratories. The role of miniaturization, robustness of spectrometer and portability are really crucial when field inspection tools should be developed. We present an advanced spectral sensor based on a tunable Microelectromechanical (MEMS) Fabry-Perot Interferometer which will meet these requirements. We describe the wireless device design, operation principle and easy-to-use algorithms to adapt the sensor to number of applications. Multiple devices can be operated simultaneously and seamlessly through cloud connectivity. We also present some practical NIR applications carried out with truly portable NIR device.

  14. MEMS Coupled Resonator for Filter Application in Air

    KAUST Repository

    Ilyas, Saad

    2017-11-03

    We present a mechanically coupled MEMS H resonator capable of performing simultaneous amplification and filter operation in air. The device comprises of two doubly clamped polyimide microbeams joined through the middle by a coupling beam of the same size. The resonator is fabricated via a multilayer surface micromachining process. A special fabrication process and device design is employed to enable the device\\'s operation in air and to achieve mechanical amplification of the output response. Moreover, mixed-frequency excitation is used to demonstrate a tunable wide band filter. The device design combined with the mixed-frequency excitation is used to demonstrate simultaneous amplification and filtering in air.

  15. Tunable cavity resonator including a plurality of MEMS beams

    Science.gov (United States)

    Peroulis, Dimitrios; Fruehling, Adam; Small, Joshua Azariah; Liu, Xiaoguang; Irshad, Wasim; Arif, Muhammad Shoaib

    2015-10-20

    A tunable cavity resonator includes a substrate, a cap structure, and a tuning assembly. The cap structure extends from the substrate, and at least one of the substrate and the cap structure defines a resonator cavity. The tuning assembly is positioned at least partially within the resonator cavity. The tuning assembly includes a plurality of fixed-fixed MEMS beams configured for controllable movement relative to the substrate between an activated position and a deactivated position in order to tune a resonant frequency of the tunable cavity resonator.

  16. Triaxial MEMS accelerometer with screen printed PZT thick film

    DEFF Research Database (Denmark)

    Hindrichsen, Christian Carstensen; Almind, Ninia Sejersen; Brodersen, Simon Hedegaard

    2010-01-01

    Piezoelectric thick films have increasing interest due to the potential high sensitivity and actuation force for MEMS sensors and actuators. The screen printing technique is a promising deposition technique for realizing piezoelectric thick films in the thickness range from 10-100 mu m. In this w...... and the first mode resonance frequency is 11 kHz. A Finite Element Method (FEM) model is used to validate the measured sensitivity and resonance frequency. Good agreement between the model and the measurements is seen....

  17. Outlook and challenges of nano devices, sensors, and MEMS

    CERN Document Server

    Liu, Ziv

    2017-01-01

    This book provides readers with an overview of the design, fabrication, simulation, and reliability of nanoscale semiconductor devices, MEMS, and sensors, as they serve for realizing the next-generation internet of things. The authors focus on how the nanoscale structures interact with the electrical and/or optical performance, how to find optimal solutions to achieve the best outcome, how these apparatus can be designed via models and simulations, how to improve reliability, and what are the possible challenges and roadblocks moving forward.

  18. Analysis of an Electrostatic MEMS Squeeze-film Drop Ejector

    Directory of Open Access Journals (Sweden)

    Edward P. Furlani

    2009-10-01

    Full Text Available We present an analysis of an electrostatic drop-on-demand MEMS fluid ejector. The ejector consists of a microfluidic chamber with a piston that is suspended a few microns beneath a nozzle plate. A drop is ejected when a voltage is applied between the orifice plate and the piston. This produces an electrostatic force that moves the piston towards the nozzle. The moving piston generates a squeeze-film pressure distribution that causes drop ejection. We discuss the operating physics of the ejector and present a lumped-element model for predicting its performance. We calibrate the model using coupled structural-fluidic CFD analysis.

  19. A MEMS-based high frequency x-ray chopper.

    Science.gov (United States)

    Siria, A; Dhez, O; Schwartz, W; Torricelli, G; Comin, F; Chevrier, J

    2009-04-29

    Time-resolved x-ray experiments require intensity modulation at high frequencies (advanced rotating choppers have nowadays reached the kHz range). We here demonstrate that a silicon microlever oscillating at 13 kHz with nanometric amplitude can be used as a high frequency x-ray chopper. We claim that using micro-and nanoelectromechanical systems (MEMS and NEMS), it will be possible to achieve higher frequencies in excess of hundreds of megahertz. Working at such a frequency can open a wealth of possibilities in chemistry, biology and physics time-resolved experiments.

  20. Control of Bouncing in MEMS Switches Using Double Electrodes

    KAUST Repository

    Abdul Rahim, Farhan

    2016-08-09

    This paper presents a novel way of controlling the bouncing phenomenon commonly present in the Radio Frequency Microelectromechanical Systems (RF MEMS) switches using a double-electrode configuration. The paper discusses modeling bouncing using both lumped parameter and beam models. The simulations of bouncing and its control are discussed. Comparison between the new proposed method and other available control techniques is also made. The Galerkin method is applied on the beam model accounting for the nonlinear electrostatic force, squeeze film damping, and surface contact effect. The results indicate that it is possible to reduce bouncing and hence beam degradation, by the use of double electrodes.

  1. A Multifunction Low-Power Preamplifier for MEMS Capacitive Microphones

    DEFF Research Database (Denmark)

    Jawed, Syed Arsalan; Nielsen, Jannik Hammel; Gottardi, Massimo

    2009-01-01

    A multi-function two-stage chopper-stabilized preamplifier (PAMP) for MEMS capacitive microphones (MCM) is presented. The PAMP integrates digitally controllable gain, high-pass filtering and offset control, adding flexibility to the front-end readout of MCMs. The first stage of the PAMP consists...... of a source-follower (SF) while the second-stage is a capacitive gain stage. The second-stage employs chopper-stabilization (CHS), while SF buffer shields the MCM sensor from the switching spurs. The PAMP uses M poly bias resistors for the second-stage, exploiting Miller effect to achieve flat audio...

  2. Tactile MEMS-based sensor for delicate microsurgery

    Science.gov (United States)

    Park, Young Soo; Lee, Wooho; Gopalsami, Nachappa; Gundeti, Mohan

    2014-06-01

    This paper presents development of a new MEMS-based tactile microsensor to replicate the delicate sense of touch in robotic surgery. Using an epoxy-based photoresist, SU-8, as substrate, the piezoresistive type sensor is flexible, robust, and easy to fabricate in mass. Sensor characteristic tests indicate adequate sensitivity and linearity, and the multiple sensor elements can match full range of surgical tissue stiffness. Such characteristic nearly match the most delicate sense of touch at the human fingertip. It is expected such a sensor is essential for delicate surgeries, such as handling delicate tissues and microsurgery.

  3. Learning

    Directory of Open Access Journals (Sweden)

    Mohsen Laabidi

    2014-01-01

    Full Text Available Nowadays learning technologies transformed educational systems with impressive progress of Information and Communication Technologies (ICT. Furthermore, when these technologies are available, affordable and accessible, they represent more than a transformation for people with disabilities. They represent real opportunities with access to an inclusive education and help to overcome the obstacles they met in classical educational systems. In this paper, we will cover basic concepts of e-accessibility, universal design and assistive technologies, with a special focus on accessible e-learning systems. Then, we will present recent research works conducted in our research Laboratory LaTICE toward the development of an accessible online learning environment for persons with disabilities from the design and specification step to the implementation. We will present, in particular, the accessible version “MoodleAcc+” of the well known e-learning platform Moodle as well as new elaborated generic models and a range of tools for authoring and evaluating accessible educational content.

  4. Mems Electromagnetic Micro Relays Overview and Design Considerations

    Directory of Open Access Journals (Sweden)

    Zuraini Dahari, Thurai Vinay and Dinesh Sood

    2012-10-01

    Full Text Available Miniature electromagnetic relay matrices capable of switching currents up to one ampere range are  widely used in commercial applications such as instrumentation and telecommunication. Traditionally these devices have been fabricated from a number of discrete components, however in recent years the emergence of Micro Electro Mechanical System (MEMS technology has opened up the possibility for batch fabrication of microrelays at much reduced unit cost. While several electromagnetic microrelay designs have been successfully developed and commercialized for use as individual units, development work on electromagnetic microrelay matrices where individual relays can be selectively switched on and off have been fewer and less successful. Due to inherent limitations of the micromachining processes, significant dimensional and material property variations occur among individual relays in a matrix. These variations severely limit the tolerance window and hence the reliability of operation of the device. After reviewing existing designs of electromagnetic microrelays, a set of desirable design features that would make the electromagnetic microrelay more robust are identified.  A novel design incorporating these features is proposed and preliminary results of ANSYS1 simulation studies are presented.Keywords: MEMS, microrelay and electromagnetic

  5. Optical fiber accelerometer based on MEMS torsional micromirror

    Science.gov (United States)

    Zeng, Fanlin; Zhong, Shaolong; Xu, Jing; Wu, Yaming

    2008-03-01

    A novel structure of optical fiber accelerometer based on MEMS torsional micro-mirror is introduced, including MEMS torsional micro-mirror and optical signal detection. The micro-mirror is a non-symmetric one, which means that the torsional bar supporting the micro-mirror is not located in the axis where the center of the micro-mirror locates. The optical signal detection is composed of PIN diode and dual fiber collimator, which is very sensitive to the coupling angle between the input fiber and output fiber. The detection principle is that acceleration is first transformed into torsional angle of the micro-mirror, then, optical insertion loss of the dual fiber collimator caused by the angle can be received by PIN. So under the flow of acceleration to torsional angle to optical signal attenuation to optical power detection, the acceleration is detected. The theory about sensing and optical signal detect of the device are discussed in this paper. The sensitive structure parameters and performance parameters are calculated by MATLAB. To simulate the static and modal analysis, the finite element analysis, ANSYS, is employed. Based on the above calculation, several optimization methods and the final structure parameters are given. The micro-mirror is completed by using silicon-glass bonding and deep reactive ion etching (DRIE). In the experiment, the acceleration is simulated by electrostatic force and the test results show that the static acceleration detection agrees with the theory analysis very well.

  6. GPS/MEMS IMU/Microprocessor Board for Navigation

    Science.gov (United States)

    Gender, Thomas K.; Chow, James; Ott, William E.

    2009-01-01

    A miniaturized instrumentation package comprising a (1) Global Positioning System (GPS) receiver, (2) an inertial measurement unit (IMU) consisting largely of surface-micromachined sensors of the microelectromechanical systems (MEMS) type, and (3) a microprocessor, all residing on a single circuit board, is part of the navigation system of a compact robotic spacecraft intended to be released from a larger spacecraft [e.g., the International Space Station (ISS)] for exterior visual inspection of the larger spacecraft. Variants of the package may also be useful in terrestrial collision-detection and -avoidance applications. The navigation solution obtained by integrating the IMU outputs is fed back to a correlator in the GPS receiver to aid in tracking GPS signals. The raw GPS and IMU data are blended in a Kalman filter to obtain an optimal navigation solution, which can be supplemented by range and velocity data obtained by use of (l) a stereoscopic pair of electronic cameras aboard the robotic spacecraft and/or (2) a laser dynamic range imager aboard the ISS. The novelty of the package lies mostly in those aspects of the design of the MEMS IMU that pertain to controlling mechanical resonances and stabilizing scale factors and biases.

  7. Scanning Micromirror Platform Based on MEMS Technology for Medical Application

    Directory of Open Access Journals (Sweden)

    Eakkachai Pengwang

    2016-02-01

    Full Text Available This topical review discusses recent development and trends on scanning micromirrors for biomedical applications. This also includes a biomedical micro robot for precise manipulations in a limited volume. The characteristics of medical scanning micromirror are explained in general with the fundamental of microelectromechanical systems (MEMS for fabrication processes. Along with the explanations of mechanism and design, the principle of actuation are provided for general readers. In this review, several testing methodology and examples are described based on many types of actuators, such as, electrothermal actuators, electrostatic actuators, electromagnetic actuators, pneumatic actuators, and shape memory alloy. Moreover, this review provides description of the key fabrication processes and common materials in order to be a basic guideline for selecting micro-actuators. With recent developments on scanning micromirrors, performances of biomedical application are enhanced for higher resolution, high accuracy, and high dexterity. With further developments on integrations and control schemes, MEMS-based scanning micromirrors would be able to achieve a better performance for medical applications due to small size, ease in microfabrication, mass production, high scanning speed, low power consumption, mechanical stable, and integration compatibility.

  8. Improving capacitance/damping ratio in a capacitive MEMS transducer

    Science.gov (United States)

    Dias, Rosana A.; Rocha, Luis A.

    2014-01-01

    Damping forces play an important role in capacitive MEMS (microelectromechanical systems) behavior, and typical damper design (parallel-plates) cannot address the design conflict between increase in electrical capacitance and damping reduction. Squeeze-film damping in in-plane parallel-plate MEMS is discussed here and a novel damper geometry for gap-varying parallel-plates is introduced and used to increase the capacitance/damping ratio. The new geometry is compared with a typical parallel-plate design for an silicon-on-insulator process (25 µm thick) and experimental data shows an approximate 25% to 50% reduction for the damping coefficient in structures with 500 µm long dampers (for a gap variation between 0.75 and 3.75 µm), in agreement with computational fluid dynamics simulations, without significantly affecting the capacitance value (∼4% reduction). Preliminary simulations to study the role of the different geometric parameters involved in the improved geometry are also performed and reveal that the channel width is the most critical value for effective damping reduction.

  9. Design and Fabrication of a Slanted-Beam MEMS Accelerometer

    Directory of Open Access Journals (Sweden)

    Wei Xu

    2017-03-01

    Full Text Available This paper presents a novel capacitive microelectromechanical systems (MEMS accelerometer with slanted supporting beams and all-silicon sandwich structure. Its sensing mechanism is quite similar to an ordinary sandwich-type MEMS accelerometer, except that its proof mass is suspended by a beam parallel to the {111} plane of a (100 silicon wafer. In this way, each sensing element can detect accelerations in two orthogonal directions. Four of these sensing elements could work together and constitute a 3-axis micro-accelerometer by using a simple planar assembly process. This design avoids the traditional 3-axis accelerometer’ disadvantage of possible placement inaccuracy when assembling on three different planes and largely reduces the package volume. The slanted-beam accelerometer’s performance was modeled and analyzed by using both analytical calculations and finite element method (FEM simulations. A prototype of one sensing element was fabricated and tested. Measured results show that this accelerometer has a good bias stability 76.8 ppm (1σ, tested immediately after power on, two directional sensitivities (sensitivity angle α = 45.4° and low nonlinearity (<0.5% over a sensing range up to ±50 g, which demonstrates a great opportunity for future high-precision three-axis inertial measurement.

  10. MEMS Reaction Control and Maneuvering for Picosat Beyond LEO

    Science.gov (United States)

    Alexeenko, Alina

    2016-01-01

    The MEMS Reaction Control and Maneuvering for Picosat Beyond LEO project will further develop a multi-functional small satellite technology for low-power attitude control, or orientation, of picosatellites beyond low Earth orbit (LEO). The Film-Evaporation MEMS Tunable Array (FEMTA) concept initially developed in 2013, is a thermal valving system which utilizes capillary forces in a microchannel to offset internal pressures in a bulk fluid. The local vapor pressure is increased by resistive film heating until it exceeds meniscus strength in a nozzle which induces vacuum boiling and provides a stagnation pressure equal to vapor pressure at that point which is used for propulsion. Interplanetary CubeSats can utilize FEMTA for high slew rate attitude corrections in addition to desaturating reaction wheels. The FEMTA in cooling mode can be used for thermal control during high-power communication events, which are likely to accompany the attitude correction. Current small satellite propulsion options are limited to orbit correction whereas picosatellites are lacking attitude control thrusters. The available attitude control systems are either quickly saturated reaction wheels or movable high drag surfaces with long response times.

  11. Actuation control of a PiezoMEMS biomimetic robotic jellyfish

    Science.gov (United States)

    Alejandre, Alvaro; Olszewski, Oskar; Jackson, Nathan

    2017-06-01

    Biomimetic micro-robots try to mimic the motion of a living system in the form of a synthetically developed microfabricated device. Dynamic motion of living systems have evolved through the years, but trying to mimic these motions is challenging. Micro-robotics are particular challenging as the fabrication of devices and controlling the motion in 3 dimensions is difficult. However, micro-scale robotics have potential to be used in a wide range of applications. MEMS based robots that can move and function in a liquid environment is of particular interest. This paper describes the development of a piezoMEMS based device that mimics the movement of a jellyfish. The paper focuses on the development of a finite element model that investigates a method of controlling the individual piezoelectric beams in order to create a jet propulsion motion, consisting of a quick excitation pulse followed by a slow recovery pulse in order to maximize thrust and velocity. By controlling the individual beams or legs of the jellyfish robot the authors can control the robot to move precisely in 3 dimensions.

  12. An Ultra Miniature MEMS Capacitor for Arterial Pressure Measurement

    Science.gov (United States)

    Monga, A.; Vig, R.

    2012-12-01

    In biomedical field, there is a need for improving medical technologies to provide accurate diagnosis to patients. The objective is to develop a minimally invasive, implantable, pressure sensing system that continuously monitors physiological changes in real-time. For implementing, three different shapes of MEMS capacitive pressure sensor having same area of diaphragm 0.126 mm² is designed and simulated for blood pressure measurement. The various shapes which are taken are circular, square and rectangular. COMSOL multiphysics tool is used for simulation. For these shapes capacitance and deflection variation of membrane with applied pressure is studied. Result shows a sensitivity of 0.255 aF/kPa, 0.125 aF/kPa and 0.09 aF/kPa for circular, square and rectangular shape, respectively. So, circular MEMS capacitor provides the greater sensitivity than all other shapes and also provides greater deflection of diaphragm due to applied pressure of 40 kPa. Also deflection is more in circular diaphragm capacitive pressure sensor.

  13. Progress toward a MEMS fabricated 100 GHz oscillator.

    Energy Technology Data Exchange (ETDEWEB)

    Loubriel, Guillermo Manuel; Lemp, Thomas; Weyn, Mark L.; Coleman, Phillip Dale; Rowley, James E. (SAIC, Albuquerque, NM)

    2006-02-01

    This report summarizes an LDRD effort which looked at the feasibility of building a MEMS (Micro-Electro-Mechanical Systems) fabricated 100 GHz micro vacuum tube. PIC Simulations proved to be a very useful tool in investigating various device designs. Scaling parameters were identified. This in turn allowed predictions of oscillator growth based on beam parameters, cavity geometry, and cavity loading. The electron beam source was identified as a critical element of the design. FEA's (Field Emission Arrays) were purchased to be built into the micro device. Laboratory testing of the FEA's was also performed which pointed out care and handling issues along with maximum current capabilities. Progress was made toward MEMS fabrication of the device. Techniques were developed and successfully employed to build up several of the subassemblies of the device. However, the lower wall fabrication proved to be difficult and a successful build was not completed. Alternative approaches to building this structure have been identified. Although these alternatives look like good solutions for building the device, it was not possible to complete a redesign and build during the timeframe of this effort.

  14. Design and Analysis of MEMS Linear Phased Array

    Directory of Open Access Journals (Sweden)

    Guoxiang Fan

    2016-01-01

    Full Text Available A structure of micro-electro-mechanical system (MEMS linear phased array based on “multi-cell” element is designed to increase radiation sound pressure of transducer working in bending vibration mode at high frequency. In order to more accurately predict the resonant frequency of an element, the theoretical analysis of the dynamic equation of a fixed rectangular composite plate and finite element method simulation are adopted. The effects of the parameters both in the lateral and elevation direction on the three-dimensional beam directivity characteristics are comprehensively analyzed. The key parameters in the analysis include the “cell” number of element, “cell” size, “inter-cell” spacing and the number of elements, element width. The simulation results show that optimizing the linear array parameters both in the lateral and elevation direction can greatly improve the three-dimensional beam focusing for MEMS linear phased array, which is obviously different from the traditional linear array.

  15. Human blood rheology in MEMS-based microneedles

    Science.gov (United States)

    Aggarwal, P.; Johnston, C. R.

    2005-02-01

    MEMS-based microneedles have the potential to revolutionize biomedical/biotechnology applications by providing precise transdermal drug delivery and localized blood sampling. In this paper, we propose a novel theory-based model that predicts drift velocity of blood-flow through the microchannels embedded in the microneedles. The profile of blood flow in the microneedles is determined by solving the conservation of momentum equation of the liquid phase, coupled with the force balance equations at the liquid-air interface. For the first time, this work enables accurate calculation/prediction of the velocity profile of the blood flow through a vertical in-plane microneedle, considering the effect of surface tension forces which are the most prominent forces. In order to withdraw blood samples from capillaries in the dermis layer, the length of our MEMS-based in-plane microneedle has been set at 600 μm with the micro-channel thickness chosen to be 35 μm, to avoid deformation of red blood cells. Blood flow through microneedles has been computed analytically using the proposed formulation. The results are then verified by a commercial finite element simulation tool "ANSYS".

  16. Gryphon M3 system: integration of MEMS for flight control

    Science.gov (United States)

    Huang, Adam; Folk, Chris; Ho, Chih-Ming; Liu, Z.; Chu, Wesley W.; Xu, Yong; Tai, Yu-Chong

    2001-10-01

    By using distributed arrays of micro-actuators as effectors, micro-sensors to detect the optimal actuation location, and microelectronics to provide close loop feedback decisions, a low power control system has been developed for controlling a UAV. Implementing the Microsensors, Microactuators, and Microelectronics leads to what is known as a M3 (M-cubic) system. This project involves demonstrating the concept of using small actuators (approximately micron-millimeter scale) to provide large control forces for a large-scale system (approximately meter scale) through natural flow amplification phenomenon. This is theorized by using fluid separation phenomenon, vortex evolution, and vortex symmetry on a delta wing aircraft. By using MEMS actuators to control leading edge vortex separation and growth, a desired aerodynamic force can be produced about the aircraft for flight control. Consequently, a MEMS shear stress sensor array was developed for detecting the leading edge separation line where leading edge vortex flow separation occurs. By knowing the leading edge separation line, a closely coupled micro actuation from the effectors can cause the required separation that leads to vortex control. A robust and flexible balloon type actuator was developed using pneumatic pressure as the actuation force. Recently, efforts have started to address the most elusive problem of amplified distributed control (ADC) through data mining algorithms. Preliminary data mining results are promising and this part of the research is ongoing. All wind tunnel data used the baseline 56.5 degree(s) sweepback delta wing with root chord of 31.75 cm.

  17. Reliability characterization of MEMS switch using MIM test structures

    Directory of Open Access Journals (Sweden)

    Vaibhav Dubey

    2014-12-01

    Full Text Available Silicon nitride thin film dielectrics are used in capacitive radio frequency micro-electromechanical systems (MEMS switches since they provide a low insertion loss, good isolation, and low return loss. The lifetime of these switches is believed to be adversely affected by charge trapping in the silicon nitride. The goal of this research was to characterize Si3N4-based MIM (Metal–Insulator–Metal capacitors to describe the mechanisms responsible for the conduction and trapping behaviour in MEMS switches. The silicon nitride films were deposited by ICP chemical vapour deposition at room temperatures. The upper Si3N4 layer was removed by the reactive ion etching process (RIE in order to provide contact paths to the bottom electrode. In the near-stoichiometric films, different electrical characterizations were performed to study dependence of the leakage current on different electrical parameters. It was concluded that the Poole–Frenkel mechanism dominated the conduction in the silicon nitride films at high fields.

  18. MEMS Variable Stiffness Spring and Its Application in Fuze

    Directory of Open Access Journals (Sweden)

    Li Sui

    2014-04-01

    Full Text Available MEMS processing technology can manufacture any complex structures in a plane, using this point, a variable stiffness design idea for the planar micro-spring is proposed. That is, using one type of structure named contact pairs to achieve stiffness change during the micro-spring’s stretching process. Using contact pairs, three types of variable stiffness springs are designed: stiffness increase spring, stiffness decrease spring and stiffness hump spring. Finally, the variable stiffness springs’ application for fuze setback arming device is discussed. When the three types of springs are used in setback arming device, the stiffness decrease spring is better than the other two springs from security analysis. Kinematic analysis shows that, if the variable stiffness spring’s design is reasonable, the setback arming device not only can effectively solve the safety and reliability issues for rocket fuze, but also applies in small caliber grenade fuze’s working environment without changing the setback arming device’s size and structure. Analysis result indicate that the setback arming device based on MEMS variable stiffness spring is universal for rocket fuze and small caliber grenade fuze.

  19. MEMS packaging: state of the art and future trends

    Science.gov (United States)

    Bossche, Andre; Cotofana, Carmen V. B.; Mollinger, Jeff R.

    1998-07-01

    Now that the technology for Integrated sensor and MEMS devices has become sufficiently mature to allow mass production, it is expected that the prices of bare chips will drop dramatically. This means that the package prices will become a limiting factor in market penetration, unless low cost packaging solutions become available. This paper will discuss the developments in packaging technology. Both single-chip and multi-chip packaging solutions will be addressed. It first starts with a discussion on the different requirements that have to be met; both from a device point of view (open access paths to the environment, vacuum cavities, etc.) and from the application point of view (e.g. environmental hostility). Subsequently current technologies are judged on their applicability for MEMS and sensor packaging and a forecast is given for future trends. It is expected that the large majority of sensing devices will be applied in relative friendly environments for which plastic packages would suffice. Therefore, on the short term an important role is foreseen for recently developed plastic packaging techniques such as precision molding and precision dispensing. Just like in standard electronic packaging, complete wafer level packaging methods for sensing devices still have a long way to go before they can compete with the highly optimized and automated plastic packaging processes.

  20. Shock margin testing of a one-axis MEMS accelerometer.

    Energy Technology Data Exchange (ETDEWEB)

    Parson, Ted Blair; Tanner, Danelle Mary; Buchheit, Thomas Edward

    2008-07-01

    Shock testing was performed on a selected commercial-off-the-shelf - MicroElectroMechanical System (COTS-MEMS) accelerometer to determine the margin between the published absolute maximum rating for shock and the 'measured' level where failures are observed. The purpose of this testing is to provide baseline data for isolating failure mechanisms under shock and environmental loading in a representative device used or under consideration for use within systems and assemblies of the DOD/DOE weapons complex. The specific device chosen for this study was the AD22280 model of the ADXL78 MEMS Accelerometer manufactured by Analog Devices Inc. This study focuses only on the shock loading response of the device and provides the necessary data for adding influence of environmental exposure to the reliability of this class of devices. The published absolute maximum rating for acceleration in any axis was 4000 G for this device powered or unpowered. Results from this study showed first failures at 8000 G indicating a margin of error of two. Higher shock level testing indicated that an in-plane, but off-axis acceleration was more damaging than one in the sense direction.

  1. SU-8 Based MEMS Process with Two Metal Layers using α-Si as a Sacrificial Material

    KAUST Repository

    Ramadan, Khaled S.

    2012-04-01

    Polymer based microelectromechanical systems (MEMS) micromachining is finding more interest in research and applications. This is due to its low cost and less time processing compared with silicon MEMS. SU-8 is a photo-patternable polymer that is used as a structural layer for MEMS and microfluidic devices. In addition to being processed with low cost, it is a biocompatible material with good mechanical properties. Also, amorphous silicon (α-Si) has found use as a sacrificial layer in silicon MEMS applications. α-Si can be deposited at large thicknesses for MEMS applications and also can be released in a dry method using XeF2 which can solve stiction problems related to MEMS applications. In this thesis, an SU-8 MEMS process is developed using amorphous silicon (α-Si) as a sacrificial layer. Electrostatic actuation and sensing is used in many MEMS applications. SU-8 is a dielectric material which limits its direct use in electrostatic actuation. This thesis provides a MEMS process with two conductive metal electrodes that can be used for out-of-plane electrostatic applications like MEMS switches and variable capacitors. The process provides the fabrication of dimples that can be conductive or non-conductive to facilitate more flexibility for MEMS designers. This SU-8 process can fabricate SU-8 MEMS structures of a single layer of two different thicknesses. Process parameters were tuned for two sets of thicknesses which are thin (5-10μm) and thick (130μm). Chevron bent-beam structures and different suspended beams (cantilevers and bridges) were fabricated to characterize the SU-8 process through extracting the density, Young’s Modulus and the Coefficient of Thermal Expansion (CTE) of SU-8. Also, the process was tested and used as an educational tool through which different MEMS structures were fabricated including MEMS switches, variable capacitors and thermal actuators.

  2. MemBrain: An Easy-to-Use Online Webserver for Transmembrane Protein Structure Prediction

    Science.gov (United States)

    Yin, Xi; Yang, Jing; Xiao, Feng; Yang, Yang; Shen, Hong-Bin

    2018-03-01

    Membrane proteins are an important kind of proteins embedded in the membranes of cells and play crucial roles in living organisms, such as ion channels, transporters, receptors. Because it is difficult to determinate the membrane protein's structure by wet-lab experiments, accurate and fast amino acid sequence-based computational methods are highly desired. In this paper, we report an online prediction tool called MemBrain, whose input is the amino acid sequence. MemBrain consists of specialized modules for predicting transmembrane helices, residue-residue contacts and relative accessible surface area of α-helical membrane proteins. MemBrain achieves a prediction accuracy of 97.9% of A TMH, 87.1% of A P, 3.2 ± 3.0 of N-score, 3.1 ± 2.8 of C-score. MemBrain-Contact obtains 62%/64.1% prediction accuracy on training and independent dataset on top L/5 contact prediction, respectively. And MemBrain-Rasa achieves Pearson correlation coefficient of 0.733 and its mean absolute error of 13.593. These prediction results provide valuable hints for revealing the structure and function of membrane proteins. MemBrain web server is free for academic use and available at www.csbio.sjtu.edu.cn/bioinf/MemBrain/. [Figure not available: see fulltext.

  3. The Development of a Portable Hard Disk Encryption/Decryption System with a MEMS Coded Lock

    Directory of Open Access Journals (Sweden)

    Shengyong Li

    2009-11-01

    Full Text Available In this paper, a novel portable hard-disk encryption/decryption system with a MEMS coded lock is presented, which can authenticate the user and provide the key for the AES encryption/decryption module. The portable hard-disk encryption/decryption system is composed of the authentication module, the USB portable hard-disk interface card, the ATA protocol command decoder module, the data encryption/decryption module, the cipher key management module, the MEMS coded lock controlling circuit module, the MEMS coded lock and the hard disk. The ATA protocol circuit, the MEMS control circuit and AES encryption/decryption circuit are designed and realized by FPGA(Field Programmable Gate Array. The MEMS coded lock with two couplers and two groups of counter-meshing-gears (CMGs are fabricated by a LIGA-like process and precision engineering method. The whole prototype was fabricated and tested. The test results show that the user’s password could be correctly discriminated by the MEMS coded lock, and the AES encryption module could get the key from the MEMS coded lock. Moreover, the data in the hard-disk could be encrypted or decrypted, and the read-write speed of the dataflow could reach 17 MB/s in Ultra DMA mode.

  4. Feasibility of Frequency-Modulated Wireless Transmission for a Multi-Purpose MEMS-Based Accelerometer

    Directory of Open Access Journals (Sweden)

    Alessandro Sabato

    2014-09-01

    Full Text Available Recent advances in the Micro Electro-Mechanical System (MEMS technology have made wireless MEMS accelerometers an attractive tool for Structural Health Monitoring (SHM of civil engineering structures. To date, sensors’ low sensitivity and accuracy—especially at very low frequencies—have imposed serious limitations for their application in monitoring large-sized structures. Conventionally, the MEMS sensor’s analog signals are converted to digital signals before radio-frequency (RF wireless transmission. The conversion can cause a low sensitivity to the important low-frequency and low-amplitude signals. To overcome this difficulty, the authors have developed a MEMS accelerometer system, which converts the sensor output voltage to a frequency-modulated signal before RF transmission. This is achieved by using a Voltage to Frequency Conversion (V/F instead of the conventional Analog to Digital Conversion (ADC. In this paper, a prototype MEMS accelerometer system is presented, which consists of a transmitter and receiver circuit boards. The former is equipped with a MEMS accelerometer, a V/F converter and a wireless RF transmitter, while the latter contains an RF receiver and a F/V converter for demodulating the signal. The efficacy of the MEMS accelerometer system in measuring low-frequency and low-amplitude dynamic responses is demonstrated through extensive laboratory tests and experiments on a flow-loop pipeline.

  5. The Development of a Portable Hard Disk Encryption/Decryption System with a MEMS Coded Lock.

    Science.gov (United States)

    Zhang, Weiping; Chen, Wenyuan; Tang, Jian; Xu, Peng; Li, Yibin; Li, Shengyong

    2009-01-01

    In this paper, a novel portable hard-disk encryption/decryption system with a MEMS coded lock is presented, which can authenticate the user and provide the key for the AES encryption/decryption module. The portable hard-disk encryption/decryption system is composed of the authentication module, the USB portable hard-disk interface card, the ATA protocol command decoder module, the data encryption/decryption module, the cipher key management module, the MEMS coded lock controlling circuit module, the MEMS coded lock and the hard disk. The ATA protocol circuit, the MEMS control circuit and AES encryption/decryption circuit are designed and realized by FPGA(Field Programmable Gate Array). The MEMS coded lock with two couplers and two groups of counter-meshing-gears (CMGs) are fabricated by a LIGA-like process and precision engineering method. The whole prototype was fabricated and tested. The test results show that the user's password could be correctly discriminated by the MEMS coded lock, and the AES encryption module could get the key from the MEMS coded lock. Moreover, the data in the hard-disk could be encrypted or decrypted, and the read-write speed of the dataflow could reach 17 MB/s in Ultra DMA mode.

  6. Feasibility of frequency-modulated wireless transmission for a multi-purpose MEMS-based accelerometer.

    Science.gov (United States)

    Sabato, Alessandro; Feng, Maria Q

    2014-09-05

    Recent advances in the Micro Electro-Mechanical System (MEMS) technology have made wireless MEMS accelerometers an attractive tool for Structural Health Monitoring (SHM) of civil engineering structures. To date, sensors' low sensitivity and accuracy--especially at very low frequencies--have imposed serious limitations for their application in monitoring large-sized structures. Conventionally, the MEMS sensor's analog signals are converted to digital signals before radio-frequency (RF) wireless transmission. The conversion can cause a low sensitivity to the important low-frequency and low-amplitude signals. To overcome this difficulty, the authors have developed a MEMS accelerometer system, which converts the sensor output voltage to a frequency-modulated signal before RF transmission. This is achieved by using a Voltage to Frequency Conversion (V/F) instead of the conventional Analog to Digital Conversion (ADC). In this paper, a prototype MEMS accelerometer system is presented, which consists of a transmitter and receiver circuit boards. The former is equipped with a MEMS accelerometer, a V/F converter and a wireless RF transmitter, while the latter contains an RF receiver and a F/V converter for demodulating the signal. The efficacy of the MEMS accelerometer system in measuring low-frequency and low-amplitude dynamic responses is demonstrated through extensive laboratory tests and experiments on a flow-loop pipeline.

  7. Optical Fourier transform based in-plane vibration characterization for MEMS comb structure.

    Science.gov (United States)

    Gao, Yongfeng; Cao, Liangcai; You, Zheng; Zhao, Jiahao; Zhang, Zichen; Yang, Jianzhong

    2013-02-25

    On-line and on-wafer characterizations of mechanical properties of Micro-Electro-Mechanical-System (MEMS) with efficiency are very important to the mass production of MEMS foundry in the near future. However, challenges still remain. In this paper, we present an in-plane vibration characterizing method for MEMS comb using optical Fourier transform (OFT). In the experiment, the intensity distribution at the focal plane was captured to characterize the displacement of the vibrator in the MEMS comb structure. A typical MEMS comb was tested to verify the principle. The shape and the movement of MEMS comb was imitated and tested to calibrate the measurement by using a spatial light modulator (SLM). The relative standard deviations (RSD) of the measured displacements were better than 5%, where the RSD is defined as the ratio of the standard deviation to the mean. It is convinced that the presented method is feasible for on-line and on-wafer characterizations for MEMS with great convenience, high efficiency and low cost.

  8. Feasibility of Frequency-Modulated Wireless Transmission for a Multi-Purpose MEMS-Based Accelerometer

    Science.gov (United States)

    Sabato, Alessandro; Feng, Maria Q.

    2014-01-01

    Recent advances in the Micro Electro-Mechanical System (MEMS) technology have made wireless MEMS accelerometers an attractive tool for Structural Health Monitoring (SHM) of civil engineering structures. To date, sensors' low sensitivity and accuracy—especially at very low frequencies—have imposed serious limitations for their application in monitoring large-sized structures. Conventionally, the MEMS sensor's analog signals are converted to digital signals before radio-frequency (RF) wireless transmission. The conversion can cause a low sensitivity to the important low-frequency and low-amplitude signals. To overcome this difficulty, the authors have developed a MEMS accelerometer system, which converts the sensor output voltage to a frequency-modulated signal before RF transmission. This is achieved by using a Voltage to Frequency Conversion (V/F) instead of the conventional Analog to Digital Conversion (ADC). In this paper, a prototype MEMS accelerometer system is presented, which consists of a transmitter and receiver circuit boards. The former is equipped with a MEMS accelerometer, a V/F converter and a wireless RF transmitter, while the latter contains an RF receiver and a F/V converter for demodulating the signal. The efficacy of the MEMS accelerometer system in measuring low-frequency and low-amplitude dynamic responses is demonstrated through extensive laboratory tests and experiments on a flow-loop pipeline. PMID:25198003

  9. E-MEM: efficient computation of maximal exact matches for very large genomes.

    Science.gov (United States)

    Khiste, Nilesh; Ilie, Lucian

    2015-02-15

    Alignment of similar whole genomes is often performed using anchors given by the maximal exact matches (MEMs) between their sequences. In spite of significant amount of research on this problem, the computation of MEMs for large genomes remains a challenging problem. The leading current algorithms employ full text indexes, the sparse suffix array giving the best results. Still, their memory requirements are high, the parallelization is not very efficient, and they cannot handle very large genomes. We present a new algorithm, efficient computation of MEMs (E-MEM) that does not use full text indexes. Our algorithm uses much less space and is highly amenable to parallelization. It can compute all MEMs of minimum length 100 between the whole human and mouse genomes on a 12 core machine in 10 min and 2 GB of memory; the required memory can be as low as 600 MB. It can run efficiently genomes of any size. Extensive testing and comparison with currently best algorithms is provided. The source code of E-MEM is freely available at: http://www.csd.uwo.ca/∼ilie/E-MEM/ CONTACT: ilie@csd.uwo.ca Supplementary data are available at Bioinformatics online. © The Author 2014. Published by Oxford University Press. All rights reserved. For Permissions, please e-mail: journals.permissions@oup.com.

  10. MEMS- and NEMS-based smart devices and systems

    Science.gov (United States)

    Varadan, Vijay K.

    2001-11-01

    The microelectronics industry has seen explosive growth during the last thirty years. Extremely large markets for logic and memory devices have driven the development of new materials, and technologies for the fabrication of even more complex devices with features sized now don at the sub micron and nanometer level. Recent interest has arisen in employing these materials, tools and technologies for the fabrication of miniature sensors and actuators and their integration with electronic circuits to produce smart devices and systems. This effort offers the promise of: 1) increasing the performance and manufacturability of both sensors and actuators by exploiting new batch fabrication processes developed including micro stereo lithographic an micro molding techniques; 2) developing novel classes of materials and mechanical structures not possible previously, such as diamond like carbon, silicon carbide and carbon nanotubes, micro-turbines and micro-engines; 3) development of technologies for the system level and wafer level integration of micro components at the nanometer precision, such as self-assembly techniques and robotic manipulation; 4) development of control and communication systems for MEMS devices, such as optical and RF wireless, and power delivery systems, etc. A novel composite structure can be tailored by functionalizing carbon nano tubes and chemically bonding them with the polymer matrix e.g. block or graft copolymer, or even cross-linked copolymer, to impart exceptional structural, electronic and surface properties. Bio- and Mechanical-MEMS devices derived from this hybrid composite provide a new avenue for future smart systems. The integration of NEMS (NanoElectroMechanical Systems), MEMS, IDTs (Interdigital Transducers) and required microelectronics and conformal antenna in the multifunctional smart materials and composites results in a smart system suitable for sensing and control of a variety functions in automobile, aerospace, marine and civil

  11. Linguagem e memória no construir de futuros professores de inglês

    Directory of Open Access Journals (Sweden)

    Tania Regina de Souza Romero

    2008-01-01

    Full Text Available Centramo-nos em uma pesquisa com graduandos de Letras, com o propósito de entender suas concepções sobre ensino-aprendizagem e linguagem para posterior ação educativa na Universidade. Implicada nesse objetivo prático, está a discussão do papel da linguagem (Vygotsky, 1994; Smolka, 2000; Rossetti-Ferreira; Amorim; Silva, 2004, narrativa (Bruner, 2002 e memória (Middleton; Brown, 2005 na constituição da identidade profissional (Vieira, 1999 de futuros professores de inglês. A análise lingüística dos dados é realizada com o apoio instrumental de princípios da Lingüística Sistêmico-Funcional (Martin; Rose, 2003.Based on research carried out with under-graduate Letters students, we aim at understanding their concepts of learning and teaching, as well as of language in order to plan actions in the University education process. Implied in this practical purpose, this contribution further discusses the role of language (Vygotsky, 1994; Smolka, 2000; Rossetti-Ferreira; Amorim; Silva, 2004, narrative (Bruner, 2002 and memory (Middleton; Brown, 2005 in the constitution of professional identity (Vieira, 1999 of future teachers of English. The linguistic analysis counts on the instrumental support of Systemic Functional Linguistics principles (Martin; Rose, 2003.

  12. Compact MEMS-driven pyramidal polygon reflector for circumferential scanned endoscopic imaging probe.

    Science.gov (United States)

    Mu, Xiaojing; Zhou, Guangya; Yu, Hongbin; Du, Yu; Feng, Hanhua; Tsai, Julius Ming Lin; Chau, Fook Siong

    2012-03-12

    A novel prototype of an electrothermal chevron-beam actuator based microelectromechanical systems (MEMS) platform has been successfully developed for circumferential scan. Microassembly technology is utilized to construct this platform, which consists of a MEMS chevron-beam type microactuator and a micro-reflector. The proposed electrothermal microactuators with a two-stage electrothermal cascaded chevron-beam driving mechanism provide displacement amplification, thus enabling a highly reflective micro-pyramidal polygon reflector to rotate a large angle for light beam scanning. This MEMS platform is ultra-compact, supports circumferential imaging capability and is suitable for endoscopic optical coherence tomography (EOCT) applications, for example, for intravascular cancer detection.

  13. A CAD Model for Creep Behavior of RF-MEMS Varactors and Circuits

    OpenAIRE

    Hsu, Hao-Han; Peroulis, Dimitrios

    2011-01-01

    In this paper, we propose a compact computer-aided design (CAD) model that may be utilized to simulate the creep behavior of RF microelectromechanical systems (RF-MEMS) varactors in RF circuits and subsystems. This model is capable of calculating the long-term response of RF-MEMS devices to an arbitrary input waveform. It is implemented using Agilent's Advanced Design System (ADS). The presented CAD model employs the generalized Voigt-Kelvin model to capture the long-term behavior of RF-MEMS ...

  14. AngleNav: MEMS Tracker to Facilitate CT-Guided Puncture.

    Science.gov (United States)

    Li, Rui; Xu, Sheng; Pritchard, William F; Karanian, John W; Krishnasamy, Venkatesh P; Wood, Bradford J; Tse, Zion Tsz Ho

    2018-01-05

    As a low-cost needle navigation system, AngleNav may be used to improve the accuracy, speed, and ease of CT-guided needle punctures. The AngleNav hardware includes a wireless device with a microelectromechanical (MEMS) tracker that can be attached to any standard needle. The physician defines the target, desired needle path and skin entry point on a CT slice image. The accuracy of AngleNav was first tested in a 3D-printed calibration platform in a benchtop setting. An abdominal phantom study was then performed in a CT scanner to validate the accuracy of the device's angular measurement. Finally, an in vivo swine study was performed to guide the needle towards liver targets (n = 8). CT scans of the targets were used to quantify the angular errors and needle tip-to-targeting distance errors between the planned needle path and the final needle position. The MEMS tracker showed a mean angular error of 0.01° with a standard deviation (SD) of 0.62° in the benchtop setting. The abdominal phantom test showed a mean angular error of 0.87° with an SD of 1.19° and a mean tip-to-target distance error of 4.89 mm with an SD of 1.57 mm. The animal experiment resulted in a mean angular error of 6.6° with an SD of 1.9° and a mean tip-to-target distance error of 8.7 mm with an SD of 3.1 mm. These results demonstrated the feasibility of AngleNav for CT-guided interventional workflow. The angular and distance errors were reduced by 64.4 and 54.8% respectively if using AngleNav instead of freehand insertion, with a limited number of operators. AngleNav assisted the physicians to deliver accurate needle insertion during CT-guided intervention. The device could potentially reduce the learning curve for physicians to perform CT-guided needle targeting.

  15. The relationship between working memory and apraxia of speech A interrelação entre memória operacional e apraxia de fala

    Directory of Open Access Journals (Sweden)

    Fernanda Chapchap Martins

    2009-09-01

    Full Text Available The present study aimed to verify the relationship between working memory (WM and apraxia of speech and explored which WM components were involved in the motor planning of speech. A total of 22 patients and 22 healthy adults were studied. These patients were selected according to the following inclusion criteria: a single brain lesion in the left hemisphere, presence of apraxia of speech and sufficient oral comprehension. This study involved assessment of apraxia of speech and evaluation of working memory capacity. The performance of apraxic patients was significantly poorer than that of controls, where this reached statistical significance. The study concluded that participants with apraxia of speech presented a working memory deficit and that this was probably related to the articulatory process of the phonoarticulatory loop. Furthermore, all apraxic patients presented a compromise in working memory.O objetivo do presente estudo foi verificar a interrelação entre memória operacional e apraxia verbal e explorar quais os componentes desta memória estariam envolvidos na programação motora da fala. Foram avaliados 22 pacientes apráxicos e 22 controles. Todos os participantes foram submetidos a avaliação da apraxia de fala. Para investigar a memória operacional, foram aplicados o teste de span de dígitos na ordem direta e inversa, um teste de repetição de palavras longas e curtas e o Rey Auditory Verbal Learning Test, que investiga, além da alça articulatória, o buffer episódico. O desempenho dos apráxicos em todos os testes de memória foi estatisticamente significante mais baixo que o desempenho dos controles. Concluímos que indivíduos com apraxia apresentam um déficit na memória operacional e que este déficit está mais relacionado ao processo articulatório da alça fonoarticulatória.

  16. MEMS device for mass market gas and chemical sensors

    Science.gov (United States)

    Kinkade, Brian R.; Daly, James T.; Johnson, Edward A.

    2000-08-01

    in the house. Internet grocery delivery services could check for spoiled foods in their clients' refrigerators. City emissions regulators could monitor the various emissions sources throughout the area from their desk to predict how many pollution vouchers they will need to trade in the next week. We describe a new component architecture for mass-market sensors based on silicon microelectromechanical systems (MEMS) technology. MEMS are micrometer-scale devices that can be fabricated as discrete devices or large arrays, using the technology of integrated circuit manufacturing. These new photonic bandgap and MEMS fabricataion technologies will simplify the component technology to provide high-quality gas and chemical sensors at consumer prices.

  17. Fabrication and Characterization of a CMOS-MEMS Humidity Sensor.

    Science.gov (United States)

    Dennis, John-Ojur; Ahmed, Abdelaziz-Yousif; Khir, Mohd-Haris

    2015-07-10

    This paper reports on the fabrication and characterization of a Complementary Metal Oxide Semiconductor-Microelectromechanical System (CMOS-MEMS) device with embedded microheater operated at relatively elevated temperatures (40 °C to 80 °C) for the purpose of relative humidity measurement. The sensing principle is based on the change in amplitude of the device due to adsorption or desorption of humidity on the active material layer of titanium dioxide (TiO2) nanoparticles deposited on the moving plate, which results in changes in the mass of the device. The sensor has been designed and fabricated through a standard 0.35 µm CMOS process technology and post-CMOS micromachining technique has been successfully implemented to release the MEMS structures. The sensor is operated in the dynamic mode using electrothermal actuation and the output signal measured using a piezoresistive (PZR) sensor connected in a Wheatstone bridge circuit. The output voltage of the humidity sensor increases from 0.585 mV to 30.580 mV as the humidity increases from 35% RH to 95% RH. The output voltage is found to be linear from 0.585 mV to 3.250 mV as the humidity increased from 35% RH to 60% RH, with sensitivity of 0.107 mV/% RH; and again linear from 3.250 mV to 30.580 mV as the humidity level increases from 60% RH to 95% RH, with higher sensitivity of 0.781 mV/% RH. On the other hand, the sensitivity of the humidity sensor increases linearly from 0.102 mV/% RH to 0.501 mV/% RH with increase in the temperature from 40 °C to 80 °C and a maximum hysteresis of 0.87% RH is found at a relative humidity of 80%. The sensitivity is also frequency dependent, increasing from 0.500 mV/% RH at 2 Hz to reach a maximum value of 1.634 mV/% RH at a frequency of 12 Hz, then decreasing to 1.110 mV/% RH at a frequency of 20 Hz. Finally, the CMOS-MEMS humidity sensor showed comparable response, recovery, and repeatability of measurements in three cycles as compared to a standard sensor that directly

  18. Fabrication and Characterization of a CMOS-MEMS Humidity Sensor

    Directory of Open Access Journals (Sweden)

    John-Ojur Dennis

    2015-07-01

    Full Text Available This paper reports on the fabrication and characterization of a Complementary Metal Oxide Semiconductor-Microelectromechanical System (CMOS-MEMS device with embedded microheater operated at relatively elevated temperatures (40 °C to 80 °C for the purpose of relative humidity measurement. The sensing principle is based on the change in amplitude of the device due to adsorption or desorption of humidity on the active material layer of titanium dioxide (TiO2 nanoparticles deposited on the moving plate, which results in changes in the mass of the device. The sensor has been designed and fabricated through a standard 0.35 µm CMOS process technology and post-CMOS micromachining technique has been successfully implemented to release the MEMS structures. The sensor is operated in the dynamic mode using electrothermal actuation and the output signal measured using a piezoresistive (PZR sensor connected in a Wheatstone bridge circuit. The output voltage of the humidity sensor increases from 0.585 mV to 30.580 mV as the humidity increases from 35% RH to 95% RH. The output voltage is found to be linear from 0.585 mV to 3.250 mV as the humidity increased from 35% RH to 60% RH, with sensitivity of 0.107 mV/% RH; and again linear from 3.250 mV to 30.580 mV as the humidity level increases from 60% RH to 95% RH, with higher sensitivity of 0.781 mV/% RH. On the other hand, the sensitivity of the humidity sensor increases linearly from 0.102 mV/% RH to 0.501 mV/% RH with increase in the temperature from 40 °C to 80 °C and a maximum hysteresis of 0.87% RH is found at a relative humidity of 80%. The sensitivity is also frequency dependent, increasing from 0.500 mV/% RH at 2 Hz to reach a maximum value of 1.634 mV/% RH at a frequency of 12 Hz, then decreasing to 1.110 mV/% RH at a frequency of 20 Hz. Finally, the CMOS-MEMS humidity sensor showed comparable response, recovery, and repeatability of measurements in three cycles as compared to a standard sensor that

  19. Treatment of porcine oocytes with MEM vitamins during in vitro maturation improves subsequent blastocyst development following nuclear transfer.

    Science.gov (United States)

    Naruse, Kenji; Quan, Yan-Shi; Choi, Su-Min; Park, Chang-Sik; Jin, Dong-Il

    2007-06-01

    This study was carried out to investigate the effects of minimum essential medium (MEM) vitamins during in vitro maturation (IVM)/in vitro culture (IVC) of porcine nuclear transfer (NT) embryos on subsequent developmental capacity in vitro. Porcine cumulus-oocyte complexes (COCs) were divided into five groups, matured for 44 h in maturation medium with various concentrations of MEM vitamins (0, 0.05, 0.1, 0.2 and 0.4%), and observed for maturation rate. Also, COCs were matured in NUSU-23 media without MEM vitamins for 44 h and cultured in PZM-3 media with various concentrations of MEM vitamins (0, 0.05, 0.4 and 1.0%) for 6 days following nuclear transfer. Factorial (IVM/IVC) experiments were also performed in NCSU-23 medium with or without 0.05% MEM vitamins and PZM-3 medium with or without 0.4% MEM vitamins. They were then tested by examining in vitro development of the porcine reconstructed embryos. The maturation rates of the COCs treated with the MEM vitamins did not differ significantly among the MEM vitamin-treated groups. Addition of vitamins to culture medium did not affect development of porcine reconstructed embryos in vitro. However, addition of low concentrations of MEM vitamins only to maturation medium increased (PMEM vitamins to IVC medium did not enhance the developmental rate compared with the control group. Thus, addition of MEM vitamins to IVM medium could improve subsequent blastocyst development of porcine NT embryos.

  20. MEMS based pumped liquid cooling systems for micro/nano spacecraft thermal control

    Science.gov (United States)

    Birur, G. C.; Shakkottai, P.; Sur, T. W

    2001-01-01

    The objective is to develop MEMS based pumped liquid cooling system for removing over 20 W/cm squared from high power density microelectronics and science payloads considered for future micro/nano sciencecraft.

  1. 10^3 Segment MEMS Deformable-Mirror Process Development Project

    Data.gov (United States)

    National Aeronautics and Space Administration — Iris AO will extend its proven segmented MEMS deformable mirror architecture to large array sizes required for high-contrast astrophysical imagers. Current...

  2. RF Front End Based on MEMS Components for Miniaturized Digital EVA Radio Project

    Data.gov (United States)

    National Aeronautics and Space Administration — In this SBIR project, AlphaSense, Inc. and the Carnegie Mellon University propose to develop a RF receiver front end based on CMOS-MEMS components for miniaturized...

  3. RF Front End Based on MEMS Components for Miniaturized Digital EVA Radio Project

    Data.gov (United States)

    National Aeronautics and Space Administration — In this proposal, AlphaSense, Inc. (AI) and the Carnegie Mellon University (CMU) detail the development of RF front end based on MEMS components for miniaturized...

  4. CMOS-MEMS Microgravity Accelerometer with High-Precision DC Response Project

    Data.gov (United States)

    National Aeronautics and Space Administration — In this Phase II SBIR project a high-sensitivity low-noise all-silicon CMOS-MEMS accelerometer for quasi-steady measurements of accelerations at sub 1 micro-g levels...

  5. CMOS-MEMS Microgravity Accelerometer with High-Precision DC Response Project

    Data.gov (United States)

    National Aeronautics and Space Administration — This Phase I SBIR effort initiates development of a high-sensitivity low-noise all-silicon CMOS-MEMS accelerometer for quasi-steady measurements of accelerations at...

  6. Fabrication Process and Electronics Development for Scaling Segmented MEMS DMs Project

    Data.gov (United States)

    National Aeronautics and Space Administration — Microelectromechanical systems (MEMS) technology has the potential to create deformable mirrors (DM) with more than 10^4 actuators that have size, weight, and power...

  7. Stable Tactical-Grade MEMS IMU for Spin-Stabilized Rockets Project

    Data.gov (United States)

    National Aeronautics and Space Administration — An Integrated MEMS IMU is proposed that will operate effectively in a spinning rocket up to 7 revs/sec. The IMU contains three gyroscopes and nine accelerometers on...

  8. Miniaturized MEMS-Based Gas Chromatograph for High Inertial Loads Associated with Planetary Missions Project

    Data.gov (United States)

    National Aeronautics and Space Administration — Thorleaf Research, Inc. proposes to develop a rugged, miniaturized, low power MEMS-based gas chromatograph (GC) capable of handling the high inertial loads...

  9. Separation of Cells using a Fluidic MEMS Device and a Quantitative Analysis of Cell Movement

    Science.gov (United States)

    Isoda, Takaaki; Ishida, Yasuaki

    Fluidic micro electro mechanical system (fluidic MEMS) devices, composed of a micro pump, mixer, valve, reactor, sensor and an electric circuit on a chip, have been widely applied in biotechnology and medical analyses. This study describes the design and fabrication of a fluidic MEMS device that can separate living leukocyte cells from a single droplet of blood (red corpuscles flowed toward the exit of the fluidic MEMS device. The separation rate of the red corpuscles has been achieved to 91 ± 9% in a unit area of 0.1 mm2. Further, the change in an area of a living leukocyte cell separated in the chip, was quantitatively analyzed. This study proposes a method for separating and measuring living cells in a fluidic MEMS device.

  10. A 0.1 G-to-20 G integrated MEMS inertial sensor

    Science.gov (United States)

    Yamane, Daisuke; Konishi, Toshifumi; Matsushima, Takaaki; Toshiyoshi, Hiroshi; Masu, Kazuya; Machida, Katsuyuki

    2015-08-01

    This paper presents a novel integrated MEMS inertial sensor with a wide range of acceleration from 0.1 G to 20 G (G = 9.8 m/s2) and with a design suitable for CMOS integration. Owing to the high-density of post-processed gold and the multi-metal layer technology, we have implemented different types of single-axis MEMS capacitive inertial sensors on a single chip of 4 × 4 mm2 in area to obtain a wide sensing range. The estimated Brownian noise was between 82.4 nG/Hz1/2 and 1.11 µG/Hz1/2. The experimental results show that the MEMS sensor has higher sensing resolution than those of conventional MEMS accelerometers.

  11. High performance MEMS accelerometers for concrete SHM applications and comparison with COTS accelerometers

    Science.gov (United States)

    Kavitha, S.; Joseph Daniel, R.; Sumangala, K.

    2016-01-01

    Accelerometers used for civil and huge mechanical structural health monitoring intend to measure the shift in the natural frequency of the monitored structures (accelerometers is inversely proportional to the frequency squared. Commercial MEMS (Micro Electro-Mechanical System) accelerometers that are generally designed for large bandwidth (e.g 25 kHz in ADXL150) have poor sensor level sensitivity and therefore uses complex signal conditioning electronics to achieve large sensitivity and low noise floor which in turn results in higher cost. In this work, an attempt has been made to design MEMS capacitive and piezoresistive accelerometers for smaller bandwidth using IntelliSuite and CoventorWare MEMS tools respectively. The various performance metrics have been obtained using simulation experiments and the results show that these sensors have excellent voltage sensitivity, noise performance and high resolution at sensor level and are even superior to commercial MEMS accelerometers.

  12. Advances in piezoelectric PZT-based RF MEMS components and systems

    Science.gov (United States)

    Benoit, R. R.; Rudy, R. Q.; Pulskamp, J. S.; Polcawich, R. G.; Bedair, S. S.

    2017-08-01

    There is continuing interest in radio frequency (RF) microelectromechanical system (MEMS) devices due to their ability to offer exceptional RF performance, high linearity and low power consumption. To date, there is an impressive amount of RF MEMS components such as; switches, resonators, varactors, and tunable inductors that have enabled smaller, cheaper and more efficient RF systems. RF MEMS devices contain micromachined components that have the ability to move so that a change in the mechanical state of a device will result in a change to the device’s RF properties. There are many common modes of actuation, including, but not limited to: electrostatic, magnetostatic, piezoelectric, and electrothermal actuation. Although there are attractive aspects and drawbacks to each of these technologies, this paper will focus on advances in the application of piezoelectric actuation, and in particular the use of lead zirconium titanate (PZT), for RF MEMS.

  13. Topography improvements in MEMS DMs for high-contrast, high-resolution imaging Project

    Data.gov (United States)

    National Aeronautics and Space Administration — We propose to develop a 3064 actuator, continuous facesheet MEMS deformable mirror using a modified fabrication process that will eliminate mid-spatial frequency...

  14. Modeling, Calibration and Control for Extreme-Precision MEMS Deformable Mirrors Project

    Data.gov (United States)

    National Aeronautics and Space Administration — Iris AO will develop electromechanical models and actuator calibration methods to enable open-loop control of MEMS deformable mirrors (DMs) with unprecedented...

  15. SiC Thin Films on Insulating Substrates for Robust Microelectromechanical System (MEMS) Applications

    National Research Council Canada - National Science Library

    Cheng, Lin; Steckl, Andrew J

    2003-01-01

    An increasing demand for robust MEMS devices, such as micro-sensors, that can operate at temperatures well above 300 deg C and often in severe environments has stimulated the search for alternatives to Si. [1...

  16. MEM and Nott dynamic retinoscopy in patients with disorders of vergence and accommodation.

    Science.gov (United States)

    García, Angel; Cacho, Pilar

    2002-05-01

    The accommodative response in 34 patients with accommodative and binocular disorders was assessed with two different techniques of dynamic retinoscopy used in clinical practice: monocular estimate method (MEM) and Nott retinoscopy. The data obtained by both techniques were compared, evaluating the correlation and agreement between them. Results showed that there were statistically significant differences between the techniques with MEM values being more plus than Nott ones. There was a high correlation between the two techniques (0.90) and the regression analysis indicated that a linear relationship existed between MEM and Nott dynamic retinoscopy, so that accommodative lag value for Nott dynamic retinoscopy would be calculated by dividing the MEM result by 2. However, although both retinoscopies were related, there was a lack of agreement between them (+/-0.53 D) indicating that the two methods are not interchangeable for clinical purposes.

  17. Single-Chip Multiple-Frequency RF MEMS Resonant Platform for Wireless Communications Project

    Data.gov (United States)

    National Aeronautics and Space Administration — A novel, single-chip, multiple-frequency platform for RF/IF filtering and clock reference based on contour-mode aluminum nitride (AlN) MEMS piezoelectric resonators...

  18. The Effects of Mechanical Coupling on the Electrical Impedance of MEMS Resonators for UHF Filter Applications

    National Research Council Canada - National Science Library

    Hohreiter, Luke

    2004-01-01

    .... These Finite Element Analysis (FEA) simulations are performed using the ANSYS software and demonstrate the significance of mechanical coupling between MEMS longitudinal-mode bar (L-Bar) resonators...

  19. A Fully Symmetric and Completely Decoupled MEMS-SOI Gyroscope

    Directory of Open Access Journals (Sweden)

    Abdelhameed SHARAF

    2011-04-01

    Full Text Available This paper introduces a novel MEMS gyroscope that is capable of exciting the drive mode differentially. The structure also decouples the drive and sense modes via an intermediate mass and decoupling beams. Both drive and sense modes are fully differential enabling control over the zero-rate-output for the former and maximizing output sensitivity using a bridge circuit for the latter. Further, the structure is fully symmetric about the x- and y- axes which results in minimizing the temperature sensitivity problem. Complete analytical analysis based on the equations of motion was performed and verified using two commercially available finite element software packages. Results from both methods are in good agreement. The analysis of the sensor shows an electrical sensitivity of 1.14 (mV/(º/s. The gyroscope was fabricated using single mask and deep reactive ion etching. The measurement of the resonance frequency performed showing a good agreement with the analytical and numerical analysis.

  20. Polyimide and Metals MEMS Multi-User Processes

    KAUST Repository

    Arevalo, Arpys

    2016-11-01

    The development of a polyimide and metals multi-user surface micro-machining process for Micro-electro-mechanical Systems (MEMS) is presented. The process was designed to be as general as possible, and designed to be capable to fabricate different designs on a single silicon wafer. The process was not optimized with the purpose of fabricating any one specific device but can be tweaked to satisfy individual needs depending on the application. The fabrication process uses Polyimide as the structural material and three separated metallization layers that can be interconnected depending on the desired application. The technology allows the development of out-of-plane compliant mechanisms, which can be combined with six variations of different physical principles for actuation and sensing on a single processed silicon wafer. These variations are: electrostatic motion, thermal bimorph actuation, capacitive sensing, magnetic sensing, thermocouple-based sensing and radio frequency transmission and reception.

  1. Optical performance requirements for MEMS-scanner-based microdisplays

    Science.gov (United States)

    Urey, Hakan; Wine, David W.; Osborn, Thor D.

    2000-08-01

    High-resolution and high frame rate dynamic microdisplays can be implemented by scanning a photon beam in a raster format across the viewer's retina. Microvision is developing biaxial MEMS scanners for such video display applications. This paper discusses the optical performance requirements for scanning display systems. The display resolution directly translates into a scan-angle-mirror-size product and the frame rate translates into vertical and horizontal scanner frequencies. (theta) -product and fh are both very important figures of merit for scanner performance comparison. In addition, the static and dynamic flatness of the scanners, off-axis motion and scan repeatability, scanner position sensor accuracy all have a direct impact on display image quality.

  2. Modeling framework for piezoelectrically actuated MEMS tunable lenses.

    Science.gov (United States)

    Farghaly, Mahmoud A; Akram, Muhammad Nadeem; Halvorsen, Einar

    2016-12-12

    WWe report a modeling framework for evaluating the performance of piezoelectrically actuated MEMS tunable lenses. It models the static opto-electromechanical coupling for symmetric configurations of piezoelectric actuators based on the laminated-plate theory, linear piezoelectricity, and ray tracing. With these assumptions, it helps to find geometrical parameters for actuators on clamped square or circular diaphragms that give a diffraction-limited tunable lens with minimum F-number. The tunable lens' optical performance and its focusing capability, alone and in combination with a paraxial fixed lens, were calculated in terms of object distance and actuation voltage. Using the modeling framework, we confirmed that the modulation transfer function for objects located at different distances remains the same after voltage adjustment.

  3. MEMS gyroscope control using a novel compound robust control.

    Science.gov (United States)

    Rahmani, Mehran

    2018-01-01

    This paper proposes a new compound fractional order integral terminal sliding mode control (FOITSMC) and proportional-derivative control (PD-FOITSMC) for the control of a MEMS gyroscope. In order to improve the robustness of the conventional integral terminal sliding mode control (ITSMC), a fractional integral terminal sliding mode surface is applied. The chattering problem in FOITSMC, which is usually generated by the excitation of fast un-modelled dynamic is the main drawback. A PD controller is employed in order to eliminate chattering phenomenon. The stability of the PD-FOITSMC is proved by Lyapunov theory. The performance of the proposed control method is compared with two other controllers such as ITSMC and FOITSMC. Numerical simulations clearly verified the effectiveness of the proposed control approach. Copyright © 2017 ISA. Published by Elsevier Ltd. All rights reserved.

  4. Design and Analyses of a MEMS Based Resonant Magnetometer

    Directory of Open Access Journals (Sweden)

    Dahai Ren

    2009-09-01

    Full Text Available A novel design of a MEMS torsional resonant magnetometer based on Lorentz force is presented and fabricated. The magnetometer consists of a silicon resonator, torsional beam, excitation coil, capacitance plates and glass substrate. Working in a resonant condition, the sensor’s vibration amplitude is converted into the sensing capacitance change, which reflects the outside magnetic flux-density. Based on the simulation, the key structure parameters are optimized and the air damping effect is estimated. The test results of the prototype are in accordance with the simulation results of the designed model. The resolution of the magnetometer can reach 30 nT. The test results indicate its sensitivity of more than 400 mV/μT when operating in a 10 Pa vacuum environment.

  5. Characterizing time-dependent mechanics in metallic MEMS

    Directory of Open Access Journals (Sweden)

    Geers M.G.D.

    2010-06-01

    Full Text Available Experiments for characterization of time-dependent material properties in free-standing metallic microelectromechanical system (MEMS pose challenges: e.g. fabrication and handling (sub-μm sized specimens, control and measurement of sub-μN loads and sub-μm displacements over long periods and various temperatures [1]. A variety of experimental setups have been reported each having their pros and cons. One example is a micro-tensile tester with an ingenious electro-static specimen gripping system [2] aiding simple specimen design giving good results at μN and sub-μm levels, but without in-situ full-field observations. Other progressive examples assimilate the specimen, MEMS actuators and load cells on a single chip [3,4] yielding significant results at nN and nm levels with in-situ TEM/SEM observability, though not without complications: complex load actuator/sensor calibration per chip, measures to reduce fabrication failure and unfeasible cofabrication on wafers with commercial metallic MEMS. This work aims to overcome these drawbacks by developing experimental methods with high sensitivity, precision and in-situ full-field observation capabilities. Moreover, these should be applicable to simple free-standing metallic MEMS that can be co-fabricated with commercial devices. These methods will then serve in systematic studies into size-effects in time-dependent material properties. First a numeric-experimental method is developed. It characterizes bending deformation of onwafer μm-sized aluminum cantilevers. A specially designed micro-clamp is used to mechanically apply a constant precise deflection of the beam (zres <50 nm for a prolonged period, see fig. 1. After this period, the deflection by the micro-clamp is removed. Full-field height maps with the ensuing deformation are measured over time with confocal optical profilometry (COP. This yields the tip deflection as function of time with ~3 nm precision, see fig.2. To extract material

  6. Review of MEMS differential scanning calorimetry for biomolecular study

    Science.gov (United States)

    Yu, Shifeng; Wang, Shuyu; Lu, Ming; Zuo, Lei

    2017-12-01

    Differential scanning calorimetry (DSC) is one of the few techniques that allow direct determination of enthalpy values for binding reactions and conformational transitions in biomolecules. It provides the thermodynamics information of the biomolecules which consists of Gibbs free energy, enthalpy and entropy in a straightforward manner that enables deep understanding of the structure function relationship in biomolecules such as the folding/unfolding of protein and DNA, and ligand bindings. This review provides an up to date overview of the applications of DSC in biomolecular study such as the bovine serum albumin denaturation study, the relationship between the melting point of lysozyme and the scanning rate. We also introduce the recent advances of the development of micro-electro-mechanic-system (MEMS) based DSCs.

  7. The Sandia MEMS passive shock sensor : FY08 design summary.

    Energy Technology Data Exchange (ETDEWEB)

    Walraven, Jeremy Allen; Baker, Michael Sean; Clemens, Rebecca C.; Mitchell, John Anthony; Brake, Matthew Robert; Epp, David S.; Wittwer, Jonathan W.

    2008-11-01

    This report summarizes design and modeling activities for the MEMS passive shock sensor. It provides a description of past design revisions, including the purposes and major differences between design revisions but with a focus on Revisions 4 through 7 and the work performed in fiscal year 2008 (FY08). This report is a reference for comparing different designs; it summarizes design parameters and analysis results, and identifies test structures. It also highlights some of the changes and or additions to models previously documented [Mitchell et al. 2006, Mitchell et al. 2008] such as the way uncertainty thresholds are analyzed and reported. It also includes dynamic simulation results used to investigate how positioning of hard stops may reduce vibration sensitivity.

  8. In-Plane MEMS Shallow Arch Beam for Mechanical Memory

    Directory of Open Access Journals (Sweden)

    Md Abdullah Al Hafiz

    2016-10-01

    Full Text Available We demonstrate a memory device based on the nonlinear dynamics of an in-plane microelectromechanical systems (MEMS clamped–clamped beam resonator, which is deliberately fabricated as a shallow arch. The arch beam is made of silicon, and is electrostatically actuated. The concept relies on the inherent quadratic nonlinearity originating from the arch curvature, which results in a softening behavior that creates hysteresis and co-existing states of motion. Since it is independent of the electrostatic force, this nonlinearity gives more flexibility in the operating conditions and allows for lower actuation voltages. Experimental results are generated through electrical characterization setup. Results are shown demonstrating the switching between the two vibrational states with the change of the direct current (DC bias voltage, thereby proving the memory concept.

  9. Reprogammable universal logic device based on mems technology

    KAUST Repository

    Hafiz, Md Adbdullah Al

    2017-06-15

    Various examples of reprogrammable universal logic devices are provided. In one example, the device can include a tunable AC input (206) to an oscillator/resonator; a first logic input and a second logic input to the oscillator/resonator, the first and second logic inputs provided by separate DC voltage sources (VA, VB), each of the first and second logic inputs including an on/off switch (A, B); and the oscillator/resonator including an output terminal (215). The tunable oscillator/resonator can be a MEMS/NEMS resonator. Switching of one or both of the first or second logic inputs on or off in association with the tuning of the AC input (206) can provide logic gate operation. The device can easily be extended to a 3-bit or n-bit device by providing additional logic inputs. Binary comparators and encoders can be implemented using a plurality of oscillators/resonators.

  10. CONTROL OF BOUNCING IN RF MEMS SWITCHES USING DOUBLE ELECTRODE

    KAUST Repository

    Abdul Rahim, Farhan

    2014-05-01

    MEMS based mechanical switches are seen to be the likely replacements for CMOS based switches due to the several advantages that these mechanical switches have over CMOS switches. Mechanical switches can be used in systems under extreme conditions and also provide more reliability and cause less power loss. A major problem with mechanical switches is bouncing. Bouncing is an undesirable characteristic which increases the switching time and causes damage to the switch structure affecting the overall switch life. This thesis proposes a new switch design that may be used to mitigate bouncing by using two voltage sources using a double electrode configuration. The effect of many switch’s tunable parameters is also discussed and an effective tuning technique is also provided. The results are compared to the current control schemes in literature and show that the double electrode scheme is a viable control option.

  11. SEMICONDUCTOR DEVICES: Characteristics of a novel biaxial capacitive MEMS accelerometer

    Science.gov (United States)

    Linxi, Dong; Yongjie, Li; Haixia, Yan; Lingling, Sun

    2010-05-01

    A novel MEMS accelerometer with grid strip capacitors is developed. The mechanical and electrical noise can be reduced greatly for the novel structure design. ANSOFT-Maxwell software was used to analyze the fringing electric field of the grid strip structure and its effects on the designed accelerometer. The effects of the width, thickness and overlapping width of the grid strip on the sensing capacitance are analyzed by using the ANSOFT-Maxwell software. The results show that the parameters have little effect on the characteristics of the presented accelerometer. The designed accelerometer was fabricated based on deep RIE and silicon-glass bonding processes. The preliminary tested sensitivities are 0.53 pF/g and 0.49 pF/g in the x and y axis directions, respectively. A resonator with grid strip structure was also fabricated whose tested quality factor is 514 in air, which proves that the grid strip structure can reduce mechanical noise.

  12. Robust Optimization of a MEMS Accelerometer Considering Temperature Variations

    Science.gov (United States)

    Liu, Guangjun; Yang, Feng; Bao, Xiaofan; Jiang, Tao

    2015-01-01

    A robust optimization approach for a MEMS accelerometer to minimize the effects of temperature variations is presented. The mathematical model of the accelerometer is built. The effects of temperature variations on the output performance of the accelerometer are determined, and thermal deformation of the accelerometer is analyzed. The deviations of the output capacitance and resonance frequency due to temperature fluctuations are calculated and discussed. The sensitivity analysis method is employed to determine the design variables for robust optimization and find out the key structural parameters that have most significant influence on the output capacitance and resonance frequency of the accelerometer. The mathematical model and procedure for the robust optimization of the accelerometer are proposed. The robust optimization problem is solved and discussed. The robust optimization results show that an optimized accelerometer with high sensitivity, high temperature robustness and decoupling structure is finally obtained. PMID:25785308

  13. Natural Frequency Design for an Integrated Capacitive MEMS Inertial Sensor

    Science.gov (United States)

    Jeong, Heewon; Degawa, Munenori; Goto, Yasushi

    A capacitive microelectromechanical systems (MEMS) inertial sensor that is able to measure an acceleration and angular rate (rotation) simultaneously has been developed. Integration is the only practical approach to realizing low-cost and small-size sensors, largely because both assembling and aligning tasks for individual sensors such as for accelerometers and gyroscopes are eliminated. In this paper the developed sensor shares mechanical parts such as seismic masses and suspensions as well as electrical parts such as a capacitive-voltage conversion circuits for measuring different inertial information such as acceleration and angular rate. We report the design scheme for the natural frequencies of the inertial sensor element with which the mechanical parts and detection circuits are shared for a specific application such as for a vehicle electronic stability control system. This design scheme can also be applied for a device that contains peripheral circuits on the sensor element as well.

  14. Adaptive Subband Filtering Method for MEMS Accelerometer Noise Reduction

    Directory of Open Access Journals (Sweden)

    Piotr PIETRZAK

    2008-12-01

    Full Text Available Silicon microaccelerometers can be considered as an alternative to high-priced piezoelectric sensors. Unfortunately, relatively high noise floor of commercially available MEMS (Micro-Electro-Mechanical Systems sensors limits the possibility of their usage in condition monitoring systems of rotating machines. The solution of this problem is the method of signal filtering described in the paper. It is based on adaptive subband filtering employing Adaptive Line Enhancer. For filter weights adaptation, two novel algorithms have been developed. They are based on the NLMS algorithm. Both of them significantly simplify its software and hardware implementation and accelerate the adaptation process. The paper also presents the software (Matlab and hardware (FPGA implementation of the proposed noise filter. In addition, the results of the performed tests are reported. They confirm high efficiency of the solution.

  15. Initially Imperfect MEMS Microplates Under Electrostatic Actuation: Theory and Experiment

    KAUST Repository

    Saghir, Shahid

    2016-12-05

    Microplates are building blocks of many Micro-Electro-Mechanical Systems (MEMS). It is common for them to undergo imperfections due to residual stresses caused by the micro fabrication process. Such plates are essentially different from perfectly flat plates and cannot be modeled using the governing equations of flat plates. In this article, we adopt the governing equations of imperfect plates employing the modified von-Karman strains. These equations then are used to develop a Reduced Order Model based on the Galerkin procedure to simulate the static and dynamic behavior of an electrostatically actuated microplate. Also, microplates made of silicon nitride are fabricated and tested. First, the static behaviour of the microplate is investigated when applying a static voltage Vdc. To study the dynamic behaviour we apply a harmonic voltage, Vac, superimposed to Vdc. Simulation results show good agreement with the experimentally measured responses.

  16. Review of MEMS differential scanning calorimetry for biomolecular study

    Science.gov (United States)

    Yu, Shifeng; Wang, Shuyu; Lu, Ming; Zuo, Lei

    2017-07-01

    Differential scanning calorimetry (DSC) is one of the few techniques that allow direct determination of enthalpy values for binding reactions and conformational transitions in biomolecules. It provides the thermodynamics information of the biomolecules which consists of Gibbs free energy, enthalpy and entropy in a straightforward manner that enables deep understanding of the structure function relationship in biomolecules such as the folding/unfolding of protein and DNA, and ligand bindings. This review provides an up to date overview of the applications of DSC in biomolecular study such as the bovine serum albumin denaturation study, the relationship between the melting point of lysozyme and the scanning rate. We also introduce the recent advances of the development of micro-electro-mechanic-system (MEMS) based DSCs.

  17. Development of a MEMS device to monitor glaucoma

    Science.gov (United States)

    Shankar, Smitha; Chaffey, J. P.

    2005-02-01

    Glaucoma is one of the leading causes of blindness affecting millions of people worldwide. Regular monitoring of intra ocular pressure (IOP) in the eyes is an important component in the treatment of this affliction. Current manual measurements do not give room for continuous indication of the progression of the disease. Microelectromechanical System (MEMS) technology lends itself to the development of devices capable of in-situ monitoring of the phenomenon that occur at the micro and nano scales, inside the human body. The paper reports on the complex flow and pressure relationships in the eye and the current methods of monitoring Glaucoma. The comparison highlights the requirements of an implantable miniature device that can indicate the changes leading to an increase of IOP inside the eye. An analysis of the pressures in the anterior chamber of the eye was undertaken to estimate the out put voltages that could be obtained from a micro structure implanted in the eye.

  18. MEM: A physical-based directional meteoroid model

    Science.gov (United States)

    McNamara, H.; Cooke, W.; Suggs, R.

    2004-01-01

    Three years of research conducted by the University of Western Ontario into the nature and distribution of the sporadic sources have been incorporated into a Meteoroid Engineering Model (MEM) by members of the Meteoroid Environments Office at NASA's Marshall Space Flight Center. This paper gives a broad overview of this model, new features of which include: a) identification of the sporadic radiants with real sources of meteoroids, such as comets, b) a physics-based approach which yields accurate fluxes and directionality for interplanetary spacecraft anywhere from 0.2 AU to 2 AU. and c) velocity distributions obtained from theory and validated against observation. Its use and application is also described, along with existing limitations and plans for future improvements.

  19. Vibrations of Elastic Systems With Applications to MEMS and NEMS

    CERN Document Server

    Magrab, Edward B

    2012-01-01

    This work presents a unified approach to the vibrations of elastic systems as applied to MEMS devices, mechanical components, and civil structures. Applications include atomic force microscopes, energy harvesters, and carbon nanotubes and consider such complicating effects as squeeze film damping, viscous fluid loading, in-plane forces, and proof mass interactions with their elastic supports. These effects are analyzed as single degree-of-freedom models and as more realistic elastic structures. The governing equations and boundary conditions for beams, plates, and shells with interior and boundary attachments are derived by applying variational calculus to an expression describing the energy of the system. The advantages of this approach regarding the generation of orthogonal functions and the Rayleigh-Ritz method are demonstrated. A large number of graphs and tables are given to show the impact of various factors on the systems’ natural frequencies, mode shapes, and responses.

  20. Direct methanol fuel cell stack based on MEMS technology

    Science.gov (United States)

    Zhang, Yufeng; Tang, Xiaochuan; Yuan, Zhenyu; Liu, Xiaowei

    2008-10-01

    This paper presents a design configuration of silicon-based micro direct methanol fuel cell (DMFC) stack in a planar array. The integrated series connection is oriented in a "flip-flop" configuration with electrical interconnections made by thin-film metal layers that coat the flow channels etched in the silicon substrate. The configuration features small connection space and low contact resistance. The MEMS fabrication process was utilized to fabricate the silicon plates of DMFC stack. This DMFC stack with an active area of 64mm x 11mm was characterized at room temperature and normal atmosphere. Experimental results show that the prototype stack is able to generate an open-circuit voltage of 2.7V and a maximum power density of 2.2mW/cm2, which demonstrate the feasibility of this new DMFC stack configuration.