Novel rf power sensor based on capacitive MEMS technology

NARCIS (Netherlands)

Fernandez, L.J.; Visser, Eelke; Sesé, J.; Jansen, Henricus V.; Wiegerink, Remco J.; Flokstra, Jakob

2003-01-01

We present the theory, design, fabrication of and first measurements on a novel power for radio frequency (rf) signals, based on capacitive measurements. The novelty of this sensor is thtat it measures the force that is created between the rf signal and a grounded membrande suspended above the line

A novel capacitance sensor for fireside corrosion measurement

Science.gov (United States)

Ban, Heng; Li, Zuoping

2009-11-01

Fireside corrosion in coal-fired power plants is a leading mechanism for boiler tube failures. Online monitoring of fireside corrosion can provide timely data to plant operators for mitigation implementation. This paper presents a novel sensor concept for measuring metal loss based on electrical capacitance. Laboratory-scale experiments demonstrated the feasibility of design, fabrication, and operation of the sensor. The fabrication of the prototype sensor involved sputtering deposition of a thin metal coating with varying thickness on a ceramic substrate. Corrosion metal loss resulted in a proportional decrease in electrical capacitance of the sensor. Laboratory experiments using a muffle furnace with an oxidation environment demonstrated that low carbon steel coatings on ceramic substrate survived cyclic temperatures over 500 °C. Measured corrosion rates of sputtered coating in air had an Arrhenius exponential dependence on temperature, with metal thickness loss ranging from 2.0 nm/h at 200 °C to 2.0 μm/h at 400 °C. Uncertainty analysis indicated that the overall measurement uncertainty was within 4%. The experimental system showed high signal-to-noise ratio, and the sensor could measure submicrometer metal thickness changes. The laboratory experiments demonstrated that the sensor concept and measurement system are capable of short term, online monitoring of metal loss, indicating the potential for the sensor to be used for fireside corrosion monitoring and other metal loss measurement.

Multi-Channel Capacitive Sensor Arrays

Directory of Open Access Journals (Sweden)

Bingnan Wang

2016-01-01

Full Text Available In this paper, multi-channel capacitive sensor arrays based on microstrip band-stop filters are studied. The sensor arrays can be used to detect the proximity of objects at different positions and directions. Each capacitive sensing structure in the array is connected to an inductive element to form resonance at different frequencies. The resonances are designed to be isolated in the frequency spectrum, such that the change in one channel does not affect resonances at other channels. The inductive element associated with each capacitive sensor can be surface-mounted inductors, integrated microstrip inductors or metamaterial-inspired structures. We show that by using metamaterial split-ring structures coupled to a microstrip line, the quality factor of each resonance can be greatly improved compared to conventional surface-mounted or microstrip meander inductors. With such a microstrip-coupled split-ring design, more sensing elements can be integrated in the same frequency spectrum, and the sensitivity can be greatly improved.

SnO2 Nanoparticle-Based Passive Capacitive Sensor for Ethylene Detection

Directory of Open Access Journals (Sweden)

Mangilal Agarwal

2012-01-01

Full Text Available A passive capacitor-based ethylene sensor using SnO2 nanoparticles is presented for the detection of ethylene gas. The nanoscale particle size (10 nm to 15 nm and film thickness (1300 nm of the sensing dielectric layer in the capacitor model aid in sensing ethylene at room temperature and eliminate the need for microhotplates used in existing bulk SnO2-resistive sensors. The SnO2-sensing layer is deposited using room temperature dip coating process on flexible polyimide substrates with copper as the top and bottom plates of the capacitor. The capacitive sensor fabricated with SnO2 nanoparticles as the dielectric showed a total decrease in capacitance of 5 pF when ethylene gas concentration was increased from 0 to 100 ppm. A 7 pF decrease in capacitance was achieved by introducing a 10 nm layer of platinum (Pt and palladium (Pd alloy deposited on the SnO2 layer. This also improved the response time by 40%, recovery time by 28%, and selectivity of the sensor to ethylene mixed in a CO2 gas environment by 66%.

Designing a robust high-speed CMOS-MEMS capacitive humidity sensor

International Nuclear Information System (INIS)

Lazarus, N; Fedder, G K

2012-01-01

In our previous work (Lazarus and Fedder 2011 J. Micromech. Microeng. 21 0650281), we demonstrated a CMOS-MEMS capacitive humidity sensor with a 72% improvement in sensitivity over the highest previously integrated on a CMOS die. This paper explores a series of methods for creating a faster and more manufacturable high-sensitivity capacitive humidity sensor. These techniques include adding oxide pillars to hold the plates apart, spin coating polymer to allow sensors to be fabricated more cheaply, adding a polysilicon heater and etching away excess polymer in the release holes. In most cases a tradeoff was found between sensitivity and other factors such as response time or robustness. A robust high-speed sensor was designed with a sensitivity of 0.21% change in capacitance per per cent relative humidity, while dropping the response time constant from 70 to 4s. Although less sensitive than our design, the sensor remains 17% more sensitive than the most sensitive interdigitated designs successfully integrated with CMOS. (paper)

Piezoelectric Zinc Oxide Based MEMS Acoustic Sensor

Directory of Open Access Journals (Sweden)

Aarti Arora

2008-04-01

Full Text Available An acoustic sensors exhibiting good sensitivity was fabricated using MEMS technology having piezoelectric zinc oxide as a dielectric between two plates of capacitor. Thin film zinc oxide has structural, piezoelectric and optical properties for surface acoustic wave (SAW and bulk acoustic wave (BAW devices. Oxygen effficient films are transparent and insulating having wide applications for sensors and transducers. A rf sputtered piezoelectric ZnO layer transforms the mechanical deflection of a thin etched silicon diaphragm into a piezoelectric charge. For 25-micron thin diaphragm Si was etched in tetramethylammonium hydroxide solution using bulk micromachining. This was followed by deposition of sandwiched structure composed of bottom aluminum electrode, sputtered 3 micron ZnO film and top aluminum electrode. A glass having 1 mm diameter hole was bonded on backside of device to compensate sound pressure in side the cavity. The measured value of central capacitance and dissipation factor of the fabricated MEMS acoustic sensor was found to be 82.4pF and 0.115 respectively, where as the value of ~176 pF was obtained for the rim capacitance with a dissipation factor of 0.138. The response of the acoustic sensors was reproducible for the devices prepared under similar processing conditions under different batches. The acoustic sensor was found to be working from 30Hz to 8KHz with a sensitivity of 139µV/Pa under varying acoustic pressure.

The Capacitance and Temperature Effects of the SiC- and Si-Based MEMS Pressure Sensor

International Nuclear Information System (INIS)

Marsi, N; Majlis, B Y; Hamzah, A A; Mohd, F

2013-01-01

This project develops the pressure sensor for monitoring the extreme conditions inside the gas turbine engine. The capacitive-based instead of piezoresistive-based pressure sensor is employed to avoid temperature drift. The deflecting (top) plate and the fixed (bottom) plate generate the capacitance, which is proportional to the applied input pressure and temperature. Two thin film materials of four different sizes are employed for the top plate, namely cubic silicon carbide (3C-SiC) and silicon (Si). Their performances in term of the sensitivity and linearity of the capacitance versus pressure are simulated at the temperature of 27°C, 500°C, 700°C and 1000°C. The results show that both materials display linear characteristics for temperature up to 500°C, although SiC-based sensor shows higher sensitivity. However, when the temperatures are increased to 700°C and 1000°C, the Si- based pressure sensor starts to malfunction at 50 MPa. However, the SiC-based pressure sensor continues to demonstrate high sensitivity and linearity at such high temperature and pressure. This paper validates the need of employing silicon carbide instead of silicon for sensing of extreme environments.

Parallel double-plate capacitive proximity sensor modelling based on effective theory

International Nuclear Information System (INIS)

Li, Nan; Zhu, Haiye; Wang, Wenyu; Gong, Yu

2014-01-01

A semi-analytical model for a double-plate capacitive proximity sensor is presented according to the effective theory. Three physical models are established to derive the final equation of the sensor. Measured data are used to determine the coefficients. The final equation is verified by using measured data. The average relative error of the calculated and the measured sensor capacitance is less than 7.5%. The equation can be used to provide guidance to engineering design of the proximity sensors

Mathematical calibration procedure of a capacitive sensor-based indexed metrology platform

International Nuclear Information System (INIS)

Brau-Avila, A; Valenzuela-Galvan, M; Herrera-Jimenez, V M; Santolaria, J; Aguilar, J J; Acero, R

2017-01-01

The demand for faster and more reliable measuring tasks for the control and quality assurance of modern production systems has created new challenges for the field of coordinate metrology. Thus, the search for new solutions in coordinate metrology systems and the need for the development of existing ones still persists. One example of such a system is the portable coordinate measuring machine (PCMM), the use of which in industry has considerably increased in recent years, mostly due to its flexibility for accomplishing in-line measuring tasks as well as its reduced cost and operational advantages compared to traditional coordinate measuring machines. Nevertheless, PCMMs have a significant drawback derived from the techniques applied in the verification and optimization procedures of their kinematic parameters. These techniques are based on the capture of data with the measuring instrument from a calibrated gauge object, fixed successively in various positions so that most of the instrument measuring volume is covered, which results in time-consuming, tedious and expensive verification and optimization procedures. In this work the mathematical calibration procedure of a capacitive sensor-based indexed metrology platform (IMP) is presented. This calibration procedure is based on the readings and geometric features of six capacitive sensors and their targets with nanometer resolution. The final goal of the IMP calibration procedure is to optimize the geometric features of the capacitive sensors and their targets in order to use the optimized data in the verification procedures of PCMMs. (paper)

Mathematical calibration procedure of a capacitive sensor-based indexed metrology platform

Science.gov (United States)

Brau-Avila, A.; Santolaria, J.; Acero, R.; Valenzuela-Galvan, M.; Herrera-Jimenez, V. M.; Aguilar, J. J.

2017-03-01

The demand for faster and more reliable measuring tasks for the control and quality assurance of modern production systems has created new challenges for the field of coordinate metrology. Thus, the search for new solutions in coordinate metrology systems and the need for the development of existing ones still persists. One example of such a system is the portable coordinate measuring machine (PCMM), the use of which in industry has considerably increased in recent years, mostly due to its flexibility for accomplishing in-line measuring tasks as well as its reduced cost and operational advantages compared to traditional coordinate measuring machines. Nevertheless, PCMMs have a significant drawback derived from the techniques applied in the verification and optimization procedures of their kinematic parameters. These techniques are based on the capture of data with the measuring instrument from a calibrated gauge object, fixed successively in various positions so that most of the instrument measuring volume is covered, which results in time-consuming, tedious and expensive verification and optimization procedures. In this work the mathematical calibration procedure of a capacitive sensor-based indexed metrology platform (IMP) is presented. This calibration procedure is based on the readings and geometric features of six capacitive sensors and their targets with nanometer resolution. The final goal of the IMP calibration procedure is to optimize the geometric features of the capacitive sensors and their targets in order to use the optimized data in the verification procedures of PCMMs.

3D capacitive tactile sensor using DRIE micromachining

Science.gov (United States)

Chuang, Chiehtang; Chen, Rongshun

2005-07-01

This paper presents a three dimensional micro capacitive tactile sensor that can detect normal and shear forces which is fabricated using deep reactive ion etching (DRIE) bulk silicon micromachining. The tactile sensor consists of a force transmission plate, a symmetric suspension system, and comb electrodes. The sensing character is based on the changes of capacitance between coplanar sense electrodes. High sensitivity is achieved by using the high aspect ratio interdigital electrodes with narrow comb gaps and large overlap areas. The symmetric suspension mechanism of this sensor can easily solve the coupling problem of measurement and increase the stability of the structure. In this paper, the sensor structure is designed, the capacitance variation of the proposed device is theoretically analyzed, and the finite element analysis of mechanical behavior of the structures is performed.

Textile-Based, Interdigital, Capacitive, Soft-Strain Sensor for Wearable Applications

Directory of Open Access Journals (Sweden)

Ozgur Atalay

2018-05-01

Full Text Available The electronic textile area has gained considerable attention due to its implementation of wearable devices, and soft sensors are the main components of these systems. In this paper, a new sensor design is presented to create stretchable, capacitance-based strain sensors for human motion tracking. This involves the use of stretchable, conductive-knit fabric within the silicone elastomer matrix, as interdigitated electrodes. While conductive fabric creates a secure conductive network for electrodes, a silicone-based matrix provides encapsulation and dimensional-stability to the structure. During the benchtop characterization, sensors show linear output, i.e., R2 = 0.997, with high response time, i.e., 50 ms, and high resolution, i.e., 1.36%. Finally, movement of the knee joint during the different scenarios was successfully recorded.

Capacitive Micro Pressure Sensor Integrated with a Ring Oscillator Circuit on Chip

Directory of Open Access Journals (Sweden)

Cheng-Yang Liu

2009-12-01

Full Text Available The study investigates a capacitive micro pressure sensor integrated with a ring oscillator circuit on a chip. The integrated capacitive pressure sensor is fabricated using the commercial CMOS (complementary metal oxide semiconductor process and a post-process. The ring oscillator is employed to convert the capacitance of the pressure sensor into the frequency output. The pressure sensor consists of 16 sensing cells in parallel. Each sensing cell contains a top electrode and a lower electrode, and the top electrode is a sandwich membrane. The pressure sensor needs a post-CMOS process to release the membranes after completion of the CMOS process. The post-process uses etchants to etch the sacrificial layers, and to release the membranes. The advantages of the post-process include easy execution and low cost. Experimental results reveal that the pressure sensor has a high sensitivity of 7 Hz/Pa in the pressure range of 0–300 kPa.

Compliment Graphene Oxide Coating on Silk Fiber Surface via Electrostatic Force for Capacitive Humidity Sensor Applications.

Science.gov (United States)

Han, Kook In; Kim, Seungdu; Lee, In Gyu; Kim, Jong Pil; Kim, Jung-Ha; Hong, Suck Won; Cho, Byung Jin; Hwang, Wan Sik

2017-02-19

Cylindrical silk fiber (SF) was coated with Graphene oxide (GO) for capacitive humidity sensor applications. Negatively charged GO in the solution was attracted to the positively charged SF surface via electrostatic force without any help from adhesive intermediates. The magnitude of the positively charged SF surface was controlled through the static electricity charges created on the SF surface. The GO coating ability on the SF improved as the SF's positive charge increased. The GO-coated SFs at various conditions were characterized using an optical microscope, scanning electron microscopy (SEM), energy-dispersive X-ray spectroscopy (EDS), Raman spectroscopy, and LCR meter. Unlike the intact SF, the GO-coated SF showed clear response-recovery behavior and well-behaved repeatability when it was exposed to 20% relative humidity (RH) and 90% RH alternatively in a capacitive mode. This approach allows humidity sensors to take advantage of GO's excellent sensing properties and SF's flexibility, expediting the production of flexible, low power consumption devices at relatively low costs.

A Flexible Capacitive Sensor with Encapsulated Liquids as Dielectrics

Directory of Open Access Journals (Sweden)

Yasunari Hotta

2012-03-01

Full Text Available Flexible and high-sensitive capacitive sensors are demanded to detect pressure distribution and/or tactile information on a curved surface, hence, wide varieties of polymer-based flexible MEMS sensors have been developed. High-sensitivity may be achieved by increasing the capacitance of the sensor using solid dielectric material while it deteriorates the flexibility. Using air as the dielectric, to maintain the flexibility, sacrifices the sensor sensitivity. In this paper, we demonstrate flexible and highly sensitive capacitive sensor arrays that encapsulate highly dielectric liquids as the dielectric. Deionized water and glycerin, which have relative dielectric constants of approximately 80 and 47, respectively, could increase the capacitance of the sensor when used as the dielectric while maintaining flexibility of the sensor with electrodes patterned on flexible polymer substrates. A reservoir of liquids between the electrodes was designed to have a leak path, which allows the sensor to deform despite of the incompressibility of the encapsulated liquids. The proposed sensor was microfabricated and demonstrated successfully to have a five times greater sensitivity than sensors that use air as the dielectric.

Flexible PVDF ferroelectric capacitive temperature sensor

KAUST Repository

Khan, Naveed; Omran, Hesham; Yao, Yingbang; Salama, Khaled N.

2015-01-01

sensitivity of 16pF/°C. The linearity measurement of the capacitance-temperature relation shows less than 0.7°C error from a best fit straight line. An LC oscillator based temperature sensor is demonstrated based on this capacitor.

A novel capacitive absolute positioning sensor based on time grating with nanometer resolution

Science.gov (United States)

Pu, Hongji; Liu, Hongzhong; Liu, Xiaokang; Peng, Kai; Yu, Zhicheng

2018-05-01

The present work proposes a novel capacitive absolute positioning sensor based on time grating. The sensor includes a fine incremental-displacement measurement component combined with a coarse absolute-position measurement component to obtain high-resolution absolute positioning measurements. A single row type sensor was proposed to achieve fine displacement measurement, which combines the two electrode rows of a previously proposed double-row type capacitive displacement sensor based on time grating into a single row. To achieve absolute positioning measurement, the coarse measurement component is designed as a single-row type displacement sensor employing a single spatial period over the entire measurement range. In addition, this component employs a rectangular induction electrode and four groups of orthogonal discrete excitation electrodes with half-sinusoidal envelope shapes, which were formed by alternately extending the rectangular electrodes of the fine measurement component. The fine and coarse measurement components are tightly integrated to form a compact absolute positioning sensor. A prototype sensor was manufactured using printed circuit board technology for testing and optimization of the design in conjunction with simulations. Experimental results show that the prototype sensor achieves a ±300 nm measurement accuracy with a 1 nm resolution over a displacement range of 200 mm when employing error compensation. The proposed sensor is an excellent alternative to presently available long-range absolute nanometrology sensors owing to its low cost, simple structure, and ease of manufacturing.

CMOS based capacitance to digital converter circuit for MEMS sensor

Science.gov (United States)

Rotake, D. R.; Darji, A. D.

2018-02-01

Most of the MEMS cantilever based system required costly instruments for characterization, processing and also has large experimental setups which led to non-portable device. So there is a need of low cost, highly sensitive, high speed and portable digital system. The proposed Capacitance to Digital Converter (CDC) interfacing circuit converts capacitance to digital domain which can be easily processed. Recent demand microcantilever deflection is part per trillion ranges which change the capacitance in 1-10 femto farad (fF) range. The entire CDC circuit is designed using CMOS 250nm technology. Design of CDC circuit consists of a D-latch and two oscillators, namely Sensor controlled oscillator (SCO) and digitally controlled oscillator (DCO). The D-latch is designed using transmission gate based MUX for power optimization. A CDC design of 7-stage, 9-stage and 11-stage tested for 1-18 fF and simulated using mentor graphics Eldo tool with parasitic. Since the proposed design does not use resistance component, the total power dissipation is reduced to 2.3621 mW for CDC designed using 9-stage SCO and DCO.

Optimization of the coplanar interdigital capacitive sensor

Science.gov (United States)

Huang, Yunzhi; Zhan, Zheng; Bowler, Nicola

2017-02-01

Interdigital capacitive sensors are applied in nondestructive testing and material property characterization of low-conductivity materials. The sensor performance is typically described based on the penetration depth of the electric field into the sample material, the sensor signal strength and its sensitivity. These factors all depend on the geometry and material properties of the sensor and sample. In this paper, a detailed analysis is provided, through finite element simulations, of the ways in which the sensor's geometrical parameters affect its performance. The geometrical parameters include the number of digits forming the interdigital electrodes and the ratio of digit width to their separation. In addition, the influence of the presence or absence of a metal backplane on the sample is analyzed. Further, the effects of sensor substrate thickness and material on signal strength are studied. The results of the analysis show that it is necessary to take into account a trade-off between the desired sensitivity and penetration depth when designing the sensor. Parametric equations are presented to assist the sensor designer or nondestructive evaluation specialist in optimizing the design of a capacitive sensor.

A Dew Point Meter Comprising a Nanoporous Thin Film Alumina Humidity Sensor with a Linearizing Capacitance Measuring Electronics

Directory of Open Access Journals (Sweden)

Dilip Kumar Ghara

2008-02-01

Full Text Available A novel trace moisture analyzer is presented comprising a capacitive nanoporous film of metal oxide sensor and electronics. The change in capacity of the sensor is due to absorption of water vapor by the pores. A simple capacitance measuring electronics is developed which can detect any change in capacitance and correlates to ambient humidity. The circuit can minimize the parasitic earth capacitance. The non linear response of the sensor is linearized with a micro-controller linearizing circuit. The experimental result shows a resolution of -4°C DP and accuracy within 2%.

Compliment Graphene Oxide Coating on Silk Fiber Surface via Electrostatic Force for Capacitive Humidity Sensor Applications

Directory of Open Access Journals (Sweden)

Kook In Han

2017-02-01

Full Text Available Cylindrical silk fiber (SF was coated with Graphene oxide (GO for capacitive humidity sensor applications. Negatively charged GO in the solution was attracted to the positively charged SF surface via electrostatic force without any help from adhesive intermediates. The magnitude of the positively charged SF surface was controlled through the static electricity charges created on the SF surface. The GO coating ability on the SF improved as the SF’s positive charge increased. The GO-coated SFs at various conditions were characterized using an optical microscope, scanning electron microscopy (SEM, energy-dispersive X-ray spectroscopy (EDS, Raman spectroscopy, and LCR meter. Unlike the intact SF, the GO-coated SF showed clear response-recovery behavior and well-behaved repeatability when it was exposed to 20% relative humidity (RH and 90% RH alternatively in a capacitive mode. This approach allows humidity sensors to take advantage of GO’s excellent sensing properties and SF’s flexibility, expediting the production of flexible, low power consumption devices at relatively low costs.

3D printed biomimetic whisker-based sensor with co-planar capacitive sensing

NARCIS (Netherlands)

Delamare, John; Sanders, Remco G.P.; Krijnen, Gijsbertus J.M.

2016-01-01

This paper describes the development of a whisker sensor for tactile purposes and which is fabricated by 3D printing. Read-out consists of a capacitive measurement of a co-planar capacitance which is affected by a dielectric that is driven into the electric field of the capacitance. The current

Reducing the capacitance of piezoelectric film sensors

Energy Technology Data Exchange (ETDEWEB)

González, Martín G., E-mail: mggonza@fi.uba.ar [Grupo de Láser, Óptica de Materiales y Aplicaciones Electromagnéticas (GLOMAE), Departamento de Física, Facultad de Ingeniería, Universidad de Buenos Aires, Paseo Colón 850, C1063ACV Buenos Aires (Argentina); Consejo Nacional de Investigaciones Científicas y Técnicas (CONICET), C1425FQB Buenos Aires (Argentina); Sorichetti, Patricio A.; Santiago, Guillermo D. [Grupo de Láser, Óptica de Materiales y Aplicaciones Electromagnéticas (GLOMAE), Departamento de Física, Facultad de Ingeniería, Universidad de Buenos Aires, Paseo Colón 850, C1063ACV Buenos Aires (Argentina)

2016-04-15

We present a novel design for large area, wideband, polymer piezoelectric sensor with low capacitance. The large area allows better spatial resolution in applications such as photoacoustic tomography and the reduced capacitance eases the design of fast transimpedance amplifiers. The metalized piezoelectric polymer thin film is segmented into N sections, electrically connected in series. In this way, the total capacitance is reduced by a factor 1/N{sup 2}, whereas the mechanical response and the active area of the sensor are not modified. We show the construction details for a two-section sensor, together with the impedance spectroscopy and impulse response experimental results that validate the design.

Reducing the capacitance of piezoelectric film sensors

International Nuclear Information System (INIS)

González, Martín G.; Sorichetti, Patricio A.; Santiago, Guillermo D.

2016-01-01

We present a novel design for large area, wideband, polymer piezoelectric sensor with low capacitance. The large area allows better spatial resolution in applications such as photoacoustic tomography and the reduced capacitance eases the design of fast transimpedance amplifiers. The metalized piezoelectric polymer thin film is segmented into N sections, electrically connected in series. In this way, the total capacitance is reduced by a factor 1/N"2, whereas the mechanical response and the active area of the sensor are not modified. We show the construction details for a two-section sensor, together with the impedance spectroscopy and impulse response experimental results that validate the design.

3-Axis Fully-Integrated Capacitive Tactile Sensor with Flip-Bonded CMOS on LTCC Interposer.

Science.gov (United States)

Asano, Sho; Muroyama, Masanori; Nakayama, Takahiro; Hata, Yoshiyuki; Nonomura, Yutaka; Tanaka, Shuji

2017-10-25

This paper reports a 3-axis fully integrated differential capacitive tactile sensor surface-mountable on a bus line. The sensor integrates a flip-bonded complementary metal-oxide semiconductor (CMOS) with capacitive sensing circuits on a low temperature cofired ceramic (LTCC) interposer with Au through vias by Au-Au thermo-compression bonding. The CMOS circuit and bonding pads on the sensor backside were electrically connected through Au bumps and the LTCC interposer, and the differential capacitive gap was formed by an Au sealing frame. A diaphragm for sensing 3-axis force was formed in the CMOS substrate. The dimensions of the completed sensor are 2.5 mm in width, 2.5 mm in length, and 0.66 mm in thickness. The fabricated sensor output coded 3-axis capacitive sensing data according to applied 3-axis force by three-dimensional (3D)-printed pins. The measured sensitivity was as high as over 34 Count/mN for normal force and 14 to 15 Count/mN for shear force with small noise, which corresponds to less than 1 mN. The hysteresis and the average cross-sensitivity were also found to be less than 2% full scale and 11%, respectively.

Energy-Efficient Capacitance-to-Digital Converters for Low-Energy Sensor Nodes

KAUST Repository

Omran, Hesham

2015-11-01

Energy efficiency is a key requirement for wireless sensor nodes, biomedical implants, and wearable devices. The energy consumption of the sensor node needs to be minimized to avoid battery replacement, or even better, to enable the device to survive on energy harvested from the ambient. Capacitive sensors do not consume static power; thus, they are attractive from an energy efficiency perspective. In addition, they can be employed in a wide range of sensing applications. However, the sensor readout circuit–i.e., the capacitance-to-digital converter (CDC)–can be the dominant source of energy consumption in the system. Thus, the development of energy-efficient CDCs is crucial to minimizing the energy consumption of capacitive sensor nodes. In the first part of this dissertation, we propose several energy-efficient CDC architectures for low-energy sensor nodes. First, we propose a digitally-controlled coarsefine multislope CDC that employs both current and frequency scaling to achieve significant improvement in energy efficiency. Second, we analyze the limitations of successive approximation (SAR) CDC, and we address these limitations by proposing a robust parasitic-insensitive opamp-based SAR CDC. Third, we propose an inverter-based SAR CDC that achieves an energy efficiency figure-of-merit (FoM) of 31fJ/Step, which is the best energy efficiency FoM reported to date. Fourth, we propose a differential SAR CDC with quasi-dynamic operation to maintain excellent energy efficiency for a scalable sample rate. In the second part of this dissertation, we study the matching properties of small integrated capacitors, which are an integral component of energy-efficient CDCs. Despite conventional wisdom, we experimentally illustrate that the mismatch of small capacitors can be directly measured, and we report mismatch measurements for subfemtofarad integrated capacitors. We also correct the common misconception that lateral capacitors match better than vertical capacitors

Sensitivity Enhancement of a PPM Level Capacitive Moisture Sensor

Directory of Open Access Journals (Sweden)

Lokesh Kumar

2017-05-01

Full Text Available Measurement of moisture at ppm or ppb level is very difficult and the fabrication of such sensors at low cost is always challenging. High sensitivity is an important parameter for trace level (ppm humidity sensors. Anelectronic detection circuit for interfacing the humidity sensor with high sensitivity requires a simple hardware circuit with few active devices. The recent trends for increasing the sensitivity include fabricating nanoporous film with a very large surface area. In the present work, the sensitivity of a parallel plate capacitive type sensor with metal oxide sensing film has been significantly improved with an aim to detect moisture from 3 to 100 ppm in the industrial process gases used to fabricate semiconductors and other sensitive electronic devices. The sensitivity has been increased by (i fabricating a nanoporous film of aluminum oxide using the sol-gel method and (ii increasing the cross-sectional area of a parallel plate capacitor. A novel double sided capacitive structure has been proposed where two capacitors have been fabricated—one on the top and one on the bottom side of a flat alumina substrate—and then the capacitors are connected in parallel. The structure has twice the sensitivity of a single sensor in the same ppm range but the size of the structure remains unchanged. The important characteristics of the sensors such as the sensitivity (S = Δ C Δ p p m × 100 , the response time (tr, and the recovery time (tc are determined and compared with a commercial SHAW, UKdew point meter. The fabricated double sided sensor has comparable sensitivity (S = 100%, tr (s = 28, tc (s = 40 with the commercial meter (S = 100.5%, tr (s = 258 but has a faster response time. The proposed method of sensitivity enhancement is simple, and mass producible.

CMOS capacitive sensors for lab-on-chip applications a multidisciplinary approach

CERN Document Server

Ghafar-Zadeh, Ebrahim

2010-01-01

The main components of CMOS capacitive biosensors including sensing electrodes, bio-functionalized sensing layer, interface circuitries and microfluidic packaging are verbosely explained in chapters 2-6 after a brief introduction on CMOS based LoCs in Chapter 1. CMOS Capacitive Sensors for Lab-on-Chip Applications is written in a simple pedagogical way. It emphasises practical aspects of fully integrated CMOS biosensors rather than mathematical calculations and theoretical details. By using CMOS Capacitive Sensors for Lab-on-Chip Applications, the reader will have circuit design methodologies,

A new interface weak-capacitance detection ASIC of capacitive liquid level sensor in the rocket

Science.gov (United States)

Yin, Liang; Qin, Yao; Liu, Xiao-Wei

2017-11-01

A new capacitive liquid level sensing interface weak-capacitance detection ASIC has been designed. This ASIC realized the detection of the output capacitance of the capacitive liquid level sensor, which converts the output capacitance of the capacitive liquid level sensor to voltage. The chip is fabricated in a standard 0.5μm CMOS process. The test results show that the linearity of capacitance detection of the ASIC is 0.05%, output noise is 3.7aF/Hz (when the capacitance which will be detected is 40 pF), the stability of capacitance detection is 7.4 × 10-5pF (1σ, 1h), the output zero position temperature coefficient is 4.5 uV/∘C. The test results prove that this interface ASIC can meet the requirement of high accuracy capacitance detection. Therefore, this interface ASIC can be applied in capacitive liquid level sensing and capacitive humidity sensing field.

Carbon Nanofiber versus Graphene-Based Stretchable Capacitive Touch Sensors for Artificial Electronic Skin.

Science.gov (United States)

Cataldi, Pietro; Dussoni, Simeone; Ceseracciu, Luca; Maggiali, Marco; Natale, Lorenzo; Metta, Giorgio; Athanassiou, Athanassia; Bayer, Ilker S

2018-02-01

Stretchable capacitive devices are instrumental for new-generation multifunctional haptic technologies particularly suited for soft robotics and electronic skin applications. A majority of elongating soft electronics still rely on silicone for building devices or sensors by multiple-step replication. In this study, fabrication of a reliable elongating parallel-plate capacitive touch sensor, using nitrile rubber gloves as templates, is demonstrated. Spray coating both sides of a rubber piece cut out of a glove with a conductive polymer suspension carrying dispersed carbon nanofibers (CnFs) or graphene nanoplatelets (GnPs) is sufficient for making electrodes with low sheet resistance values (≈10 Ω sq -1 ). The electrodes based on CnFs maintain their conductivity up to 100% elongation whereas the GnPs-based ones form cracks before 60% elongation. However, both electrodes are reliable under elongation levels associated with human joints motility (≈20%). Strikingly, structural damages due to repeated elongation/recovery cycles could be healed through annealing. Haptic sensing characteristics of a stretchable capacitive device by wrapping it around the fingertip of a robotic hand (ICub) are demonstrated. Tactile forces as low as 0.03 N and as high as 5 N can be easily sensed by the device under elongation or over curvilinear surfaces.

3-Axis Fully-Integrated Capacitive Tactile Sensor with Flip-Bonded CMOS on LTCC Interposer

Directory of Open Access Journals (Sweden)

Sho Asano

2017-10-01

Full Text Available This paper reports a 3-axis fully integrated differential capacitive tactile sensor surface-mountable on a bus line. The sensor integrates a flip-bonded complementary metal-oxide semiconductor (CMOS with capacitive sensing circuits on a low temperature cofired ceramic (LTCC interposer with Au through vias by Au-Au thermo-compression bonding. The CMOS circuit and bonding pads on the sensor backside were electrically connected through Au bumps and the LTCC interposer, and the differential capacitive gap was formed by an Au sealing frame. A diaphragm for sensing 3-axis force was formed in the CMOS substrate. The dimensions of the completed sensor are 2.5 mm in width, 2.5 mm in length, and 0.66 mm in thickness. The fabricated sensor output coded 3-axis capacitive sensing data according to applied 3-axis force by three-dimensional (3D-printed pins. The measured sensitivity was as high as over 34 Count/mN for normal force and 14 to 15 Count/mN for shear force with small noise, which corresponds to less than 1 mN. The hysteresis and the average cross-sensitivity were also found to be less than 2% full scale and 11%, respectively.

Integration of piezo-capacitive and piezo-electric nanoweb based pressure sensors for imaging of static and dynamic pressure distribution.

Science.gov (United States)

Jeong, Y J; Oh, T I; Woo, E J; Kim, K J

2017-07-01

Recently, highly flexible and soft pressure distribution imaging sensor is in great demand for tactile sensing, gait analysis, ubiquitous life-care based on activity recognition, and therapeutics. In this study, we integrate the piezo-capacitive and piezo-electric nanowebs with the conductive fabric sheets for detecting static and dynamic pressure distributions on a large sensing area. Electrical impedance tomography (EIT) and electric source imaging are applied for reconstructing pressure distribution images from measured current-voltage data on the boundary of the hybrid fabric sensor. We evaluated the piezo-capacitive nanoweb sensor, piezo-electric nanoweb sensor, and hybrid fabric sensor. The results show the feasibility of static and dynamic pressure distribution imaging from the boundary measurements of the fabric sensors.

Measurement of gas-liquid two-phase flow in micro-pipes by a capacitance sensor.

Science.gov (United States)

Ji, Haifeng; Li, Huajun; Huang, Zhiyao; Wang, Baoliang; Li, Haiqing

2014-11-26

A capacitance measurement system is developed for the measurement of gas-liquid two-phase flow in glass micro-pipes with inner diameters of 3.96, 2.65 and 1.56 mm, respectively. As a typical flow regime in a micro-pipe two-phase flow system, slug flow is chosen for this investigation. A capacitance sensor is designed and a high-resolution and high-speed capacitance measurement circuit is used to measure the small capacitance signals based on the differential sampling method. The performance and feasibility of the capacitance method are investigated and discussed. The capacitance signal is analyzed, which can reflect the voidage variation of two-phase flow. The gas slug velocity is determined through a cross-correlation technique using two identical capacitance sensors. The simulation and experimental results show that the presented capacitance measurement system is successful. Research work also verifies that the capacitance sensor is an effective method for the measurement of gas liquid two-phase flow parameters in micro-pipes.

Energy-Efficient Capacitance-to-Digital Converters for Smart Sensor Applications

KAUST Repository

Alhoshany, Abdulaziz

2017-12-01

One of the key requirements in the design of wireless sensor nodes and miniature biomedical devices is energy efficiency. For a sensor node, which is a sensor and readout circuit, to survive on limited energy sources such as a battery or harvested energy, its energy consumption should be minimized. Capacitive sensors are candidates for use in energy-constrained applications, as they do not consume static power and can be used in a wide range of applications to measure different physical, chemical or biological quantities. However, the energy consumption is dominated by the capacitive interface circuit, i.e. the capacitance-to-digital converter (CDC). Several energy-efficient CDC architectures are introduced in this dissertation to meet the demand for high resolution and energy efficiency in smart capacitive sensors. First, we propose an energy-efficient CDC based on a differential successive-approximation data converter. The proposed differential CDC employs an energy-efficient operational transconductance amplifier (OTA) based on an inverter. A wide capacitance range with fine absolute resolution is implemented in the proposed coarse-fine DAC architecture which saves 89% of silicon area. The proposed CDC achieves an energy efficiency figure-of-merit () of 45.8fJ/step, which is the best reported energy efficiency to date. Second, we propose an energy efficient CDC for high-precision capacitive resolution by using oversampling and noise shaping. The proposed CDC achieves 150 aF absolute resolution and an energy efficiency of 187fJ/conversion-step which outperforms state of the art high-precision differential CDCs. In the third and last part, we propose an in-vitro cancer diagnostic biosensor-CMOS platform for low-power, rapid detection, and low cost. The introduced platform is the first to demonstrate the ability to screen and quantify the spermidine/spermine N1 acetyltransferase (SSAT) enzyme which reveals the presence of early-stage cancer, on the surface of a

3-Axis Fully-Integrated Capacitive Tactile Sensor with Flip-Bonded CMOS on LTCC Interposer †

Science.gov (United States)

Asano, Sho; Nakayama, Takahiro; Hata, Yoshiyuki; Tanaka, Shuji

2017-01-01

This paper reports a 3-axis fully integrated differential capacitive tactile sensor surface-mountable on a bus line. The sensor integrates a flip-bonded complementary metal-oxide semiconductor (CMOS) with capacitive sensing circuits on a low temperature cofired ceramic (LTCC) interposer with Au through vias by Au-Au thermo-compression bonding. The CMOS circuit and bonding pads on the sensor backside were electrically connected through Au bumps and the LTCC interposer, and the differential capacitive gap was formed by an Au sealing frame. A diaphragm for sensing 3-axis force was formed in the CMOS substrate. The dimensions of the completed sensor are 2.5 mm in width, 2.5 mm in length, and 0.66 mm in thickness. The fabricated sensor output coded 3-axis capacitive sensing data according to applied 3-axis force by three-dimensional (3D)-printed pins. The measured sensitivity was as high as over 34 Count/mN for normal force and 14 to 15 Count/mN for shear force with small noise, which corresponds to less than 1 mN. The hysteresis and the average cross-sensitivity were also found to be less than 2% full scale and 11%, respectively. PMID:29068429

Fabrication of a printed capacitive air-gap touch sensor

Science.gov (United States)

Lee, Sang Hoon; Seo, Hwiwon; Lee, Sangyoon

2018-05-01

Unlike lithography-based processes, printed electronics does not require etching, which makes it difficult to fabricate electronic devices with an air gap. In this study, we propose a method to fabricate capacitive air-gap touch sensors via printing and coating. First, the bottom electrode was fabricated on a flexible poly(ethylene terephthalate) (PET) substrate using roll-to-roll gravure printing with silver ink. Then poly(dimethylsiloxane) (PDMS) was spin coated to form a sacrificial layer. The top electrode was fabricated on the sacrificial layer by spin coating with a stretchable silver ink. The sensor samples were then put in a tetrabutylammonium (TBAF) bath to generate the air gap by removing the sacrificial layer. The capacitance of the samples was measured for verification, and the results show that the capacitance increases in proportion to the applied force from 0 to 2.5 N.

A Two-Ply Polymer-Based Flexible Tactile Sensor Sheet Using Electric Capacitance

Directory of Open Access Journals (Sweden)

Shijie Guo

2014-01-01

Full Text Available Traditional capacitive tactile sensor sheets usually have a three-layered structure, with a dielectric layer sandwiched by two electrode layers. Each electrode layer has a number of parallel ribbon-like electrodes. The electrodes on the two electrode layers are oriented orthogonally and each crossing point of the two perpendicular electrode arrays makes up a capacitive sensor cell on the sheet. It is well known that compatibility between measuring precision and resolution is difficult, since decreasing the width of the electrodes is required to obtain a high resolution, however, this may lead to reduction of the area of the sensor cells, and as a result, lead to a low Signal/Noise (S/N ratio. To overcome this problem, a new multilayered structure and related calculation procedure are proposed. This new structure stacks two or more sensor sheets with shifts in position. Both a high precision and a high resolution can be obtained by combining the signals of the stacked sensor sheets. Trial production was made and the effect was confirmed.

New Type Multielectrode Capacitance Sensor for Liquid Level

Energy Technology Data Exchange (ETDEWEB)

Zhao, Y R [China University of Petroleum (Huadong), Qingdao (China); Shi, A P [Shandong University of Science and Technology, Qingdao (China); Chen, G Q [Shandong University of Science and Technology, Qingdao (China); Chang, Y Y [Shandong University of Science and Technology, Qingdao (China); Hang, Z [Shandong University of Science and Technology, Qingdao (China); Liu, B M [Binzhou University, Binzhou (China)

2006-10-15

This paper introduces the design of a new type multielectrode capacitance sensor for liquid level. The system regards electric field sensor MC33794 as the core and applies microcontroller MC9S12DJ128 to realize intelligent liquid level monitoring system, which overcomes the disadvantages of the traditional capacitance sensor, improves on the anti-jamming ability and the measurement precision and simplifies the system structure. Finally, the paper sums up the design of the system.

Resistive and Capacitive Based Sensing Technologies

Directory of Open Access Journals (Sweden)

Winncy Y. Du

2008-04-01

Full Text Available Resistive and capacitive (RC sensors are the most commonly used sensors. Their applications span homeland security, industry, environment, space, traffic control, home automation, aviation, and medicine. More than 30% of modern sensors are direct or indirect applications of the RC sensing principles. This paper reviews resistive and capacitive sensing technologies. The physical principles of resistive sensors are governed by several important laws and phenomena such as Ohm’s Law, Wiedemann-Franz Law; Photoconductive-, Piezoresistive-, and Thermoresistive Effects. The applications of these principles are presented through a variety of examples including accelerometers, flame detectors, pressure/flow rate sensors, RTDs, hygristors, chemiresistors, and bio-impedance sensors. The capacitive sensors are described through their three configurations: parallel (flat, cylindrical (coaxial, and spherical (concentric. Each configuration is discussed with respect to its geometric structure, function, and application in various sensor designs. Capacitance sensor arrays are also presented in the paper.

Virtual electrical capacitance tomography sensor

International Nuclear Information System (INIS)

Li, Y; Yang, W Q

2005-01-01

Electrical capacitance tomography (ECT) is an effective technique for elucidating the distribution of dielectric materials inside closed pipes or vessels. This paper describes a virtual electrical capacitance tomography (VECT) system, which can simulate a range of sensor and hardware configurations and material distributions. A selection of popular image reconstruction algorithms has been made available and image error and capacitance error tools enable their performance to be evaluated and compared. Series of frame-by-frame results can be stored for simulating real-time dynamic flows. The system is programmed in Matlab with DOS functions. It is convenient to use and low-cost to operate, providing an effective tool for engineering experiment

Low-temperature capacitive sensor based on perovskite oxides

Energy Technology Data Exchange (ETDEWEB)

Zaza, F., E-mail: fabio.zaza@enea.it; Serra, E.; Caprioli, F. [ENEA-Casaccia R.C. via Anguillarese 301, 00123 Rome (Italy); Orio, G.; Pasquali, M. [Department of Basic and Applied Sciences for Engineering, La Sapienza University, Via A. Scarpa 14/16, 00161 Rome (Italy)

2015-06-23

Energy, environmental and social issues drive towards the green political economy and the development of advanced technologies, promoting renewable energy sources, improving energy conversion efficiency and reducing exhaust gas emissions. The development of sustainable technologies requires strategic research in the area of gas sensors for monitoring air quality, controlling gas emissions and optimizing combustion processes. Solid state sensors are the most attractive one because of their simplicity in function, small size and low cost. The aim of this work is to synthetize and characterize strontium titanate and test its sensing performance. The prepared sensor device shows significant sensitivity and response rate at room-temperature. However, because of the low recovery rate, the regeneration of the sensor has to be made at high temperature for promoting the decomposition of the carbonates formed on the perovkite surface.

Low-temperature capacitive sensor based on perovskite oxides

International Nuclear Information System (INIS)

Zaza, F.; Serra, E.; Caprioli, F.; Orio, G.; Pasquali, M.

2014-01-01

Energy, environmental and social issues drive towards the green political economy and the development of advanced technologies, promoting renewable energy sources, improving energy conversion efficiency and reducing exhaust gas emissions. The development of sustainable technologies requires strategic research in the area of gas sensors for monitoring air quality, controlling gas emissions and optimizing combustion processes. Solid state sensors are the most attractive one because of their simplicity in function, small size and low cost. The aim of this work is to synthetize and characterize strontium titanate and test its sensing performance. The prepared sensor device shows significant sensitivity and response rate at room-temperature. However, because of the low recovery rate, the regeneration of the sensor has to be made at high temperature for promoting the decomposition of the carbonates formed on the perovkite surface

Low-temperature capacitive sensor based on perovskite oxides

Science.gov (United States)

Zaza, F.; Orio, G.; Serra, E.; Caprioli, F.; Pasquali, M.

2015-06-01

Energy, environmental and social issues drive towards the green political economy and the development of advanced technologies, promoting renewable energy sources, improving energy conversion efficiency and reducing exhaust gas emissions. The development of sustainable technologies requires strategic research in the area of gas sensors for monitoring air quality, controlling gas emissions and optimizing combustion processes. Solid state sensors are the most attractive one because of their simplicity in function, small size and low cost. The aim of this work is to synthetize and characterize strontium titanate and test its sensing performance. The prepared sensor device shows significant sensitivity and response rate at room-temperature. However, because of the low recovery rate, the regeneration of the sensor has to be made at high temperature for promoting the decomposition of the carbonates formed on the perovkite surface.

S Sensors: Fumarate-Based fcu-MOF Thin Film Grown on a Capacitive Interdigitated Electrode

KAUST Repository

Yassine, Omar

2016-10-31

Herein we report the fabrication of an advanced sensor for the detection of hydrogen sulfide (H2S) at room temperature, using thin films of rare-earth metal (RE)-based metal-organic framework (MOF) with underlying fcu topology. This unique MOF-based sensor is made via the insitu growth of fumarate-based fcu-MOF (fum-fcu-MOF) thin film on a capacitive interdigitated electrode. The sensor showed a remarkable detection sensitivity for H2S at concentrations down to 100ppb, with the lower detection limit around 5ppb. The fum-fcu-MOF sensor exhibits a highly desirable detection selectivity towards H2S vs. CH4, NO2, H2, and C7H8 as well as an outstanding H2S sensing stability as compared to other reported MOFs. © 2016 Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim.

Large Capacitance Measurement by Multiple Uses of MBL Charge Sensor

Science.gov (United States)

Lee, Jung Sook; Chae, Min; Kim, Jung Bog

2010-01-01

A recent article by Morse described interesting electrostatics experiments using an MBL charge sensor. In this application, the charge sensor has a large capacitance compared to the charged test object, so nearly all charges can be transferred to the sensor capacitor from the capacitor to be measured. However, the typical capacitance of commercial…

Design of electrical capacitance tomography sensors

International Nuclear Information System (INIS)

Yang, Wuqiang

2010-01-01

Electrical capacitance tomography (ECT) has been developed since the late 1980s for visualization and measurement of a permittivity distribution in a cross section using a multi-electrode capacitance sensor. While the hardware and image reconstruction algorithms for ECT have been published extensively and the topics have been reviewed, few papers have been published to discuss ECT sensors and the design issues, which are crucial for a specific application. This paper will briefly discuss the principles of ECT sensors, but mostly will address key issues for ECT sensor design, with reference to some existing ECT sensors as a good understanding of the key issues would help optimization of the design of ECT sensors. The key issues to be discussed include the number and length of electrodes, the use of external and internal electrodes, implications of wall thickness, earthed screens (including the outer screen, axial end screens and radial screens), driven guard electrodes, dealing with high temperature and high pressure, twin planes for velocity measurement by cross correlation and limitations in sensor diameter. While conventional ECT sensors are circular with the electrodes in a single plane or in twin planes, some non-conventional ECT sensors, such as square, conical and 3D sensors, will also be discussed. As a practical guidance, the procedure to fabricate an ECT sensor will be given. In the end are summary and discussion on future challenges, including re-engineering of ECT sensors. (topical review)

Design and fabrication of capacitive interdigitated electrodes for smart gas sensors

KAUST Repository

Omran, Hesham

2016-09-05

In this paper, we study the design parameters of capacitive interdigitated electrodes (IDEs) and the effect of these parameters on the sensitivity of the IDEs when employed as a capacitive gas sensor. Finite element simulations using COMSOL Multiphysics were carried out to evaluate the sensitivity of the capacitive sensor. Simulations show that for permittivity-based sensing, the optimum thickness of the sensing film is slightly more than half the wavelength of the IDEs structure. On the other hand, sensing films that are thinner than half wavelength should be used if the required sensing mechanism is based on structural swelling. Increasing the IDEs metal thickness can increase the sensitivity by increasing the sidewall electric field, but this is only true if the sensing film is thick enough to completely fill the spacing between the electrodes. A simple and reliable IDEs structure and fabrication process are proposed. Physical dry etching provides good yield and fine resolution compared to liftoff technique. Fabricated and packaged prototype sensors are presented. © 2015 IEEE.

Spectral response analysis of PVDF capacitive sensors

Science.gov (United States)

Reyes-Ramírez, B.; García-Segundo, C.; García-Valenzuela, A.

2013-06-01

We investigate the spectral response to ultrasound waves in water of low-noise capacitive sensors based on PVDF polymer piezoelectric films. First, we analyze theoretically the mechanical-to-electrical transduction as a function of the frequency of ultrasonic signals and derive an analytic expression of the sensor's transfer function. Then we present experimental results of the frequency response of a home-made PDVF in water to test signals from 1 to 20 MHz induced by a commercial hydrophone powered by a signal generator and compare with our theoretical model.

Capacitive behavior of highly-oxidized graphite

Science.gov (United States)

Ciszewski, Mateusz; Mianowski, Andrzej

2014-09-01

Capacitive behavior of a highly-oxidized graphite is presented in this paper. The graphite oxide was synthesized using an oxidizing mixture of potassium chlorate and concentrated fuming nitric acid. As-oxidized graphite was quantitatively and qualitatively analyzed with respect to the oxygen content and the species of oxygen-containing groups. Electrochemical measurements were performed in a two-electrode symmetric cell using KOH electrolyte. It was shown that prolonged oxidation causes an increase in the oxygen content while the interlayer distance remains constant. Specific capacitance increased with oxygen content in the electrode as a result of pseudo-capacitive effects, from 0.47 to 0.54 F/g for a scan rate of 20 mV/s and 0.67 to 1.15 F/g for a scan rate of 5 mV/s. Better cyclability was observed for the electrode with a higher oxygen amount.

Sol-gel zinc oxide humidity sensors integrated with a ring oscillator circuit on-a-chip.

Science.gov (United States)

Yang, Ming-Zhi; Dai, Ching-Liang; Wu, Chyan-Chyi

2014-10-28

The study develops an integrated humidity microsensor fabricated using the commercial 0.18 μm complementary metal oxide semiconductor (CMOS) process. The integrated humidity sensor consists of a humidity sensor and a ring oscillator circuit on-a-chip. The humidity sensor is composed of a sensitive film and branch interdigitated electrodes. The sensitive film is zinc oxide prepared by sol-gel method. After completion of the CMOS process, the sensor requires a post-process to remove the sacrificial oxide layer and to coat the zinc oxide film on the interdigitated electrodes. The capacitance of the sensor changes when the sensitive film adsorbs water vapor. The circuit is used to convert the capacitance of the humidity sensor into the oscillation frequency output. Experimental results show that the output frequency of the sensor changes from 84.3 to 73.4 MHz at 30 °C as the humidity increases 40 to 90%RH.

Development of a Capacitive Ice Sensor to Measure Ice Growth in Real Time

Directory of Open Access Journals (Sweden)

Xiang Zhi

2015-03-01

Full Text Available This paper presents the development of the capacitive sensor to measure the growth of ice on a fuel pipe surface in real time. The ice sensor consists of pairs of electrodes to detect the change in capacitance and a thermocouple temperature sensor to examine the ice formation situation. In addition, an environmental chamber was specially designed to control the humidity and temperature to simulate the ice formation conditions. From the humidity, a water film is formed on the ice sensor, which results in an increase in capacitance. Ice nucleation occurs, followed by the rapid formation of frost ice that decreases the capacitance suddenly. The capacitance is saturated. The developed ice sensor explains the ice growth providing information about the icing temperature in real time.

Development of a capacitive ice sensor to measure ice growth in real time.

Science.gov (United States)

Zhi, Xiang; Cho, Hyo Chang; Wang, Bo; Ahn, Cheol Hee; Moon, Hyeong Soon; Go, Jeung Sang

2015-03-19

This paper presents the development of the capacitive sensor to measure the growth of ice on a fuel pipe surface in real time. The ice sensor consists of pairs of electrodes to detect the change in capacitance and a thermocouple temperature sensor to examine the ice formation situation. In addition, an environmental chamber was specially designed to control the humidity and temperature to simulate the ice formation conditions. From the humidity, a water film is formed on the ice sensor, which results in an increase in capacitance. Ice nucleation occurs, followed by the rapid formation of frost ice that decreases the capacitance suddenly. The capacitance is saturated. The developed ice sensor explains the ice growth providing information about the icing temperature in real time.

Glucose Sensing Using Capacitive Biosensor Based on Polyvinylidene Fluoride Thin Film

Directory of Open Access Journals (Sweden)

Ambran Hartono

2018-01-01

Full Text Available A polyvinylidene fluoride (PVDF film-based capacitive biosensor was developed for glucose sensing. This device consists of a PVDF film sandwiched between two electrodes. A capacitive biosensor measures the dielectric properties of the dielectric layers at the interface between the electrolyte and the electrode. A glucose oxidase (GOx enzyme was immobilized onto the electrode to oxidize glucose. In practice, the biochemical reaction of glucose with the GOx enzyme generates free electron carriers. Consequently, the potential difference between the electrodes is increased, resulting in a measurable voltage output of the biosensor. The device was tested for various glucose concentrations in the range of 0.013 to 5.85 M, and various GOx enzyme concentrations between 4882.8 and 2.5 million units/L. We found that the sensor output increased with increasing glucose concentration up to 5.85 M. These results indicate that the PVDF film-based capacitive biosensors can be properly applied to glucose sensing and provide opportunities for the low-cost fabrication of glucose-based biosensors based on PVDF materials.

A capacitive power sensor based on the MEMS cantilever beam fabricated by GaAs MMIC technology

Science.gov (United States)

Yi, Zhenxiang; Liao, Xiaoping

2013-03-01

In this paper, a novel capacitive power sensor based on the microelectromechanical systems (MEMS) cantilever beam at 8-12 GHz is proposed, fabricated and tested. The presented design can not only realize a cantilever beam instead of the conventional fixed-fixed beam, but also provide fine compatibility with the GaAs monolithic microwave integrated circuit (MMIC) process. When the displacement of the cantilever beam is very small compared with the initial height of the air gap, the capacitance change between the measuring electrode and the cantilever beam has an approximately linear dependence on the incident radio frequency (RF) power. Impedance compensating technology, by modifying the slot width of the coplanar waveguide transmission line, is adopted to minimize the effect of the cantilever beam on the power sensor; its validity is verified by the simulation of high frequency structure simulator software. The power sensor has been fabricated successfully by Au surface micromachining using polyimide as the sacrificial layer on the GaAs substrate. Optimization of the design with impedance compensating technology has resulted in a measured return loss of less than -25 dB and an insertion loss of around 0.1 dB at 8-12 GHz, which shows the slight effect of the cantilever beam on the microwave performance of this power sensor. The measured capacitance change starts from 0.7 fF to 1.3 fF when the incident RF power increases from 100 to 200 mW and an approximate linear dependence has been obtained. The measured sensitivities of the sensor are about 6.16, 6.27 and 6.03 aF mW-1 at 8, 10 and 12 GHz, respectively.

A modified analytical model to study the sensing performance of a flexible capacitive tactile sensor array

International Nuclear Information System (INIS)

Liang, Guanhao; Wang, Yancheng; Mei, Deqing; Xi, Kailun; Chen, Zichen

2015-01-01

This paper presents a modified analytical model to study the sensing performance of a flexible capacitive tactile sensor array, which utilizes solid polydimethylsiloxane (PDMS) film as the dielectric layer. To predict the deformation of the sensing unit and capacitance changes, each sensing unit is simplified into a three-layer plate structure and divided into central, edge and corner regions. The plate structure and the three regions are studied by the general and modified models, respectively. For experimental validation, the capacitive tactile sensor array with 8  ×  8 (= 64) sensing units is fabricated. Experiments are conducted by measuring the capacitance changes versus applied external forces and compared with the general and modified models’ predictions. For the developed tactile sensor array, the sensitivity predicted by the modified analytical model is 1.25%/N, only 0.8% discrepancy from the experimental measurement. Results demonstrate that the modified analytical model can accurately predict the sensing performance of the sensor array and could be utilized for model-based optimal capacitive tactile sensor array design. (paper)

Pharmaceutical Pill Counting and Inspection Using a Capacitive Sensor

Directory of Open Access Journals (Sweden)

Ganesan LETCHUMANAN

2008-01-01

Full Text Available A capacitive sensor for high-speed counting and inspection of pharmaceutical products is proposed and evaluated. The sensor is based on a patented Electrostatic Field Sensor (EFS device, previously developed by Sparc Systems Limited. However, the sensor head proposed in this work has a significantly different geometry and has been designed with a rectangular inspection aperture of 160mm × 21mm, which best meets applications where a larger count throughput is required with a single sensor. Finite element modelling has been used to simulate the electrostatic fields generated within the sensor, and as a design tool for optimising the sensor head configuration. The actual and simulated performance of the sensor is compared and analysed in terms of the sensor performance at discriminating between damaged products or detection of miscount errors.

Sol-Gel Zinc Oxide Humidity Sensors Integrated with a Ring Oscillator Circuit On-a-Chip

Directory of Open Access Journals (Sweden)

Ming-Zhi Yang

2014-10-01

Full Text Available The study develops an integrated humidity microsensor fabricated using the commercial 0.18 μm complementary metal oxide semiconductor (CMOS process. The integrated humidity sensor consists of a humidity sensor and a ring oscillator circuit on-a-chip. The humidity sensor is composed of a sensitive film and branch interdigitated electrodes. The sensitive film is zinc oxide prepared by sol-gel method. After completion of the CMOS process, the sensor requires a post-process to remove the sacrificial oxide layer and to coat the zinc oxide film on the interdigitated electrodes. The capacitance of the sensor changes when the sensitive film adsorbs water vapor. The circuit is used to convert the capacitance of the humidity sensor into the oscillation frequency output. Experimental results show that the output frequency of the sensor changes from 84.3 to 73.4 MHz at 30 °C as the humidity increases 40 to 90%RH.

Capacitive Sensing of Glucose in Electrolytes Using Graphene Quantum Capacitance Varactors.

Science.gov (United States)

Zhang, Yao; Ma, Rui; Zhen, Xue V; Kudva, Yogish C; Bühlmann, Philippe; Koester, Steven J

2017-11-08

A novel graphene-based variable capacitor (varactor) that senses glucose based on the quantum capacitance effect was successfully developed. The sensor utilizes a metal-oxide-graphene varactor device structure that is inherently compatible with passive wireless sensing, a key advantage for in vivo glucose sensing. The graphene varactors were functionalized with pyrene-1-boronic acid (PBA) by self-assembly driven by π-π interactions. Successful surface functionalization was confirmed by both Raman spectroscopy and capacitance-voltage characterization of the devices. Through glucose binding to the PBA, the glucose concentration in the buffer solutions modulates the level of electrostatic doping of the graphene surface to different degrees, which leads to capacitance changes and Dirac voltage shifts. These responses to the glucose concentration were shown to be reproducible and reversible over multiple measurement cycles, suggesting promise for eventual use in wireless glucose monitoring.

3D printed flexible capacitive force sensor with a simple micro-controller based readout

NARCIS (Netherlands)

Schouten, Martijn G.; Sanders, Remco; Krijnen, Gijs

2017-01-01

This paper describes the development of a proof of principle of a flexible force sensor and the corresponding readout circuit. The flexible force sensor consists of a parallel plate capacitor that is 3D printed using regular and conductive thermoplastic poly-urethane (TPU). The capacitance change

Enhanced performance in capacitive force sensors using carbon nanotube/polydimethylsiloxane nanocomposites with high dielectric properties

Science.gov (United States)

Jang, Hyeyoung; Yoon, Hyungsuk; Ko, Youngpyo; Choi, Jaeyoo; Lee, Sang-Soo; Jeon, Insu; Kim, Jong-Ho; Kim, Heesuk

2016-03-01

Force sensors have attracted tremendous attention owing to their applications in various fields such as touch screens, robots, smart scales, and wearable devices. The force sensors reported so far have been mainly focused on high sensitivity based on delicate microstructured materials, resulting in low reproducibility and high fabrication cost that are limitations for wide applications. As an alternative, we demonstrate a novel capacitive-type force sensor with enhanced performance owing to the increased dielectric properties of elastomers and simple sensor structure. We rationally design dielectric elastomers based on alkylamine modified-multi-walled carbon nanotube (MWCNT)/polydimethylsiloxane (PDMS) composites, which have a higher dielectric constant than pure PDMS. The alkylamine-MWCNTs show excellent dispersion in a PDMS matrix, thus leading to enhanced and reliable dielectric properties of the composites. A force sensor array fabricated with alkylamine-MWCNT/PDMS composites presents an enhanced response due to the higher dielectric constant of the composites than that of pure PDMS. This study is the first to report enhanced performance of capacitive force sensors by modulating the dielectric properties of elastomers. We believe that the disclosed strategy to improve the sensor performance by increasing the dielectric properties of elastomers has great potential in the development of capacitive force sensor arrays that respond to various input forces.Force sensors have attracted tremendous attention owing to their applications in various fields such as touch screens, robots, smart scales, and wearable devices. The force sensors reported so far have been mainly focused on high sensitivity based on delicate microstructured materials, resulting in low reproducibility and high fabrication cost that are limitations for wide applications. As an alternative, we demonstrate a novel capacitive-type force sensor with enhanced performance owing to the increased

A new capacitive long-range displacement nanometer sensor with differential sensing structure based on time-grating

Science.gov (United States)

Yu, Zhicheng; Peng, Kai; Liu, Xiaokang; Pu, Hongji; Chen, Ziran

2018-05-01

High-precision displacement sensors, which can measure large displacements with nanometer resolution, are key components in many ultra-precision fabrication machines. In this paper, a new capacitive nanometer displacement sensor with differential sensing structure is proposed for long-range linear displacement measurements based on an approach denoted time grating. Analytical models established using electric field coupling theory and an area integral method indicate that common-mode interference will result in a first-harmonic error in the measurement results. To reduce the common-mode interference, the proposed sensor design employs a differential sensing structure, which adopts a second group of induction electrodes spatially separated from the first group of induction electrodes by a half-pitch length. Experimental results based on a prototype sensor demonstrate that the measurement accuracy and the stability of the sensor are substantially improved after adopting the differential sensing structure. Finally, a prototype sensor achieves a measurement accuracy of  ±200 nm over the full 200 mm measurement range of the sensor.

Low Power/Low Voltage Interface Circuitry for Capacitive Sensors

DEFF Research Database (Denmark)

Furst, Claus Efdmann

This thesis focuses mainly on low power/low voltage interface circuits, implemented in CMOS, for capacitive sensors. A brief discussion of demands and possibilities for analog signal processing in the future is presented. Techniques for low power design is presented. This is done by analyzing power...... power consumption. It is shown that the Sigma-Delta modulator is advantageous when embedded in a feedback loop with a mechanical sensor. Here a micro mechanical capacitive microphone. Feedback and detection circuitry for a capacitive microphone is presented. Practical implementations of low power....../low voltage interface circuitry is presented. It is demonstrated that an amplifier optimized for a capacitive microphone implemented in a standard 0.7 micron CMOS technology competes well with a traditional JFET amplifier. Furthermore a low power/low voltage 3rd order Sigma-Delta modulator is presented...

A capacitive power sensor based on the MEMS cantilever beam fabricated by GaAs MMIC technology

International Nuclear Information System (INIS)

Yi, Zhenxiang; Liao, Xiaoping

2013-01-01

In this paper, a novel capacitive power sensor based on the microelectromechanical systems (MEMS) cantilever beam at 8–12 GHz is proposed, fabricated and tested. The presented design can not only realize a cantilever beam instead of the conventional fixed–fixed beam, but also provide fine compatibility with the GaAs monolithic microwave integrated circuit (MMIC) process. When the displacement of the cantilever beam is very small compared with the initial height of the air gap, the capacitance change between the measuring electrode and the cantilever beam has an approximately linear dependence on the incident radio frequency (RF) power. Impedance compensating technology, by modifying the slot width of the coplanar waveguide transmission line, is adopted to minimize the effect of the cantilever beam on the power sensor; its validity is verified by the simulation of high frequency structure simulator software. The power sensor has been fabricated successfully by Au surface micromachining using polyimide as the sacrificial layer on the GaAs substrate. Optimization of the design with impedance compensating technology has resulted in a measured return loss of less than −25 dB and an insertion loss of around 0.1 dB at 8–12 GHz, which shows the slight effect of the cantilever beam on the microwave performance of this power sensor. The measured capacitance change starts from 0.7 fF to 1.3 fF when the incident RF power increases from 100 to 200 mW and an approximate linear dependence has been obtained. The measured sensitivities of the sensor are about 6.16, 6.27 and 6.03 aF mW −1 at 8, 10 and 12 GHz, respectively. (paper)

Novel High Temperature Capacitive Pressure Sensor Utilizing SiC Integrated Circuit Twin Ring Oscillators

Science.gov (United States)

Scardelletti, M.; Neudeck, P.; Spry, D.; Meredith, R.; Jordan, J.; Prokop, N.; Krasowski, M.; Beheim, G.; Hunter, G.

2017-01-01

This paper describes initial development and testing of a novel high temperature capacitive pressure sensor system. The pressure sensor system consists of two 4H-SiC 11-stage ring oscillators and a SiCN capacitive pressure sensor. One oscillator has the capacitive pressure sensor fixed at one node in its feedback loop and varies as a function of pressure and temperature while the other provides a pressure-independent reference frequency which can be used to temperature compensate the output of the first oscillator. A two-day repeatability test was performed up to 500C on the oscillators and the oscillator fundamental frequency changed by only 1. The SiCN capacitive pressure sensor was characterized at room temperature from 0 to 300 psi. The sensor had an initial capacitance of 3.76 pF at 0 psi and 1.75 pF at 300 psi corresponding to a 54 change in capacitance. The integrated pressure sensor system was characterized from 0 to 300 psi in steps of 50 psi over a temperature range of 25 to 500C. The pressure sensor system sensitivity was 0.113 kHzpsi at 25C and 0.026 kHzpsi at 500C.

Rough-Surface-Enabled Capacitive Pressure Sensors with 3D Touch Capability.

Science.gov (United States)

Lee, Kilsoo; Lee, Jaehong; Kim, Gwangmook; Kim, Youngjae; Kang, Subin; Cho, Sungjun; Kim, SeulGee; Kim, Jae-Kang; Lee, Wooyoung; Kim, Dae-Eun; Kang, Shinill; Kim, DaeEun; Lee, Taeyoon; Shim, Wooyoung

2017-11-01

Fabrication strategies that pursue "simplicity" for the production process and "functionality" for a device, in general, are mutually exclusive. Therefore, strategies that are less expensive, less equipment-intensive, and consequently, more accessible to researchers for the realization of omnipresent electronics are required. Here, this study presents a conceptually different approach that utilizes the inartificial design of the surface roughness of paper to realize a capacitive pressure sensor with high performance compared with sensors produced using costly microfabrication processes. This study utilizes a writing activity with a pencil and paper, which enables the construction of a fundamental capacitor that can be used as a flexible capacitive pressure sensor with high pressure sensitivity and short response time and that it can be inexpensively fabricated over large areas. Furthermore, the paper-based pressure sensors are integrated into a fully functional 3D touch-pad device, which is a step toward the realization of omnipresent electronics. © 2017 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

Intrinsic Low Hysteresis Touch Mode Capacitive Pressure Sensor

DEFF Research Database (Denmark)

Fragiacomo, Giulio; Pedersen, Thomas; Hansen, Ole

2011-01-01

Hysteresis has always been one of the main concerns when fabricating touch mode capacitive pressure sensors (TMCPS). This phenomenon can be fought at two different levels: during fabrication or after fabrication with the aid of a dedicated signal conditioning circuit. We will describe...... a microfabrication step that can be introduced in order to reduce drastically the hysteresis of this type of sensors without compromising their sensitivity. Medium-high range (0 to 10 bar absolute pressure) TMCPS with a capacitive signal span of over 100pF and less than 1 % hysteresis in the entire pressure range...

A multichannel portable ECG system with capacitive sensors

International Nuclear Information System (INIS)

Oehler, M; Schilling, M; Ling, V; Melhorn, K

2008-01-01

Capacitive sensors can be employed for measuring the electrocardiogram of a human heart without electric contact with the skin. This configuration avoids contact problems experienced by conventional electrocardiography. In our studies, we integrated these capacitive electrocardiogram electrodes in a 15-sensor array and combined this array with a tablet personal computer. By placing the system on the patient's body, we can measure a 15-channel electrocardiogram even through clothes and without any preparation. The goal of this development is to provide a new diagnostic tool that offers the user a reproducible, easy access to a fast and spatially resolved diagnostic 'heart view'

Characteristics Study of In-Situ Capacitive Sensor for Monitoring Lubrication Oil Debris.

Science.gov (United States)

Han, Zhibin; Wang, Yishou; Qing, Xinlin

2017-12-08

As an essential part of engine health monitoring (EHM), online lubrication oil debris monitoring has recently received great attention for the assessment of rotating and reciprocating parts in aero-engines, due to its high integration, low cost and safe characteristics. However, it is be a challenge to find a suitable sensor operating in such a complex environment. We present an unconventional novel approach, in which a cylinder capacitive sensor is designed and integrated with the pipeline of an engine lubrication system, so that the capacitive sensor can effectively detect changes in the lubrication oil condition. In this paper, an attempt to illustrate the performance characteristics of the developed cylinder capacitive sensor is made, through an experiment system that simulates a real scenario of a lubrication oil system. The main aim of the research was to qualitatively describe the relationship between the sensor parameter and the lubrication oil debris. In addition, the effect of the temperature and flow rate of the lubrication oil on capacitance change was performed by several experiments and we figured out a compensation method. The experimental results demonstrated that the cylinder capacitive sensor can potentially be used for lubrication oil debris monitoring of the health condition of an aero-engine.

Development of electrical capacitance sensor for tomography

International Nuclear Information System (INIS)

Rasif Mohd Zain; Jaafar Abdullah; Ismail Mustapha; Sazrol Azizee Ariff; Susan Maria Sipaun; Lojius Lombigit

2004-01-01

Electrical capacitance tomography (ECT) is one of the successful methods for imaging 2-phase liquid/gas mixture in oil pipelines and solids/gas mixture in fluidized bed and pneumatic conveying system for improvement of process plants. This paper presents the design development of an electrical capacitance sensor for use with an ECT system. This project is aimed at developing a demonstration ECT unit to be used in the oil pipe line. (Author)

The influence of hard-baking temperature applied for SU8 sensor layer on the sensitivity of capacitive chemical sensor

Science.gov (United States)

Klanjšek Gunde, Marta; Hauptman, Nina; Maček, Marijan; Kunaver, Matjaž

2009-06-01

SU8, the near-UV photosensitive epoxy-based polymer was used as a sensor layer in the capacitive chemical sensor, ready for integration with a generic double-metal CMOS technology. It was observed that the response of the sensor slowly increases with the temperature applied in hard-baking process as long as it remains below 300°C. At this temperature the response of the sensor abruptly increases and becomes almost threefold. It was shown that fully crosslinked structure of the sensor layer becomes opened and disordered when the sensor is hard-baked at temperatures between 300°C and 320°C, that is, still well below the degradation temperature of the polymer. These changes in chemical structure were analyzed by Fourier-transform infrared spectroscopy. The temperature-dependent changes of the sensor layer structure enable one to prepare a combination of capacitive chemical sensors with good discrimination between some volatile organic compounds.

Calibration of capacitance probe sensors using Electric Circuit Theory

NARCIS (Netherlands)

Kelleners, T.J.; Soppe, R.W.O.; Robinson, D.A.; Schaap, M.G.; Ayars, J.E.; Skaggs, T.H.

2004-01-01

Capacitance probe sensors are an attractive electromagnetic technique for estimating soil water content. There is concern, however, about the influence of soil salinity and soil temperature on the sensors. We present an electric circuit model that relates the sensor frequency to the permittivity of

Pick-and-place process for sensitivity improvement of the capacitive type CMOS MEMS 2-axis tilt sensor

Science.gov (United States)

Chang, Chun-I.; Tsai, Ming-Han; Liu, Yu-Chia; Sun, Chih-Ming; Fang, Weileun

2013-09-01

This study exploits the foundry available complimentary metal-oxide-semiconductor (CMOS) process and the packaging house available pick-and-place technology to implement a capacitive type micromachined 2-axis tilt sensor. The suspended micro mechanical structures such as the spring, stage and sensing electrodes are fabricated using the CMOS microelectromechanical systems (MEMS) processes. A bulk block is assembled onto the suspended stage by pick-and-place technology to increase the proof-mass of the tilt sensor. The low temperature UV-glue dispensing and curing processes are employed to bond the block onto the stage. Thus, the sensitivity of the CMOS MEMS capacitive type 2-axis tilt sensor is significantly improved. In application, this study successfully demonstrates the bonding of a bulk solder ball of 100 µm in diameter with a 2-axis tilt sensor fabricated using the standard TSMC 0.35 µm 2P4M CMOS process. Measurements show the sensitivities of the 2-axis tilt sensor are increased for 2.06-fold (x-axis) and 1.78-fold (y-axis) after adding the solder ball. Note that the sensitivity can be further improved by reducing the parasitic capacitance and the mismatch of sensing electrodes caused by the solder ball.

A microfabricated fringing field capacitive pH sensor with an integrated readout circuit

International Nuclear Information System (INIS)

Arefin, Md Shamsul; Redoute, Jean-Michel; Rasit Yuce, Mehmet; Bulut Coskun, M.; Alan, Tuncay; Neild, Adrian

2014-01-01

This work presents a microfabricated fringe-field capacitive pH sensor using interdigitated electrodes and an integrated modulation-based readout circuit. The changes in capacitance of the sensor result from the permittivity changes due to pH variations and are converted to frequency shifts using a crossed-coupled voltage controlled oscillator readout circuit. The shift in resonant frequency of the readout circuit is 30.96 MHz for a change in pH of 1.0–5.0. The sensor can be used for the measurement of low pH levels, such as gastric acid, and can be integrated with electronic pills. The measurement results show high repeatability, low noise, and a stable output.

A microfabricated fringing field capacitive pH sensor with an integrated readout circuit

Energy Technology Data Exchange (ETDEWEB)

Arefin, Md Shamsul, E-mail: md.arefin@monash.edu; Redoute, Jean-Michel; Rasit Yuce, Mehmet [Electrical and Computer Systems Engineering, Monash University, Melbourne (Australia); Bulut Coskun, M.; Alan, Tuncay; Neild, Adrian [Mechanical and Aerospace Engineering, Monash University, Melbourne (Australia)

2014-06-02

This work presents a microfabricated fringe-field capacitive pH sensor using interdigitated electrodes and an integrated modulation-based readout circuit. The changes in capacitance of the sensor result from the permittivity changes due to pH variations and are converted to frequency shifts using a crossed-coupled voltage controlled oscillator readout circuit. The shift in resonant frequency of the readout circuit is 30.96 MHz for a change in pH of 1.0–5.0. The sensor can be used for the measurement of low pH levels, such as gastric acid, and can be integrated with electronic pills. The measurement results show high repeatability, low noise, and a stable output.

An integrated energy-efficient capacitive sensor digital interface circuit

KAUST Repository

Omran, Hesham

2014-06-19

In this paper, we propose an energy-efficient 13-bit capacitive sensor interface circuit. The proposed design fully relies on successive approximation algorithm, which eliminates the need for oversampling and digital decimation filtering, and thus low-power consumption is achieved. The proposed architecture employs a charge amplifier stage to acheive parasitic insensitive operation and fine absolute resolution. Moreover, the output code is not affected by offset voltages or charge injection. The successive approximation algorithm is implemented in the capacitance-domain using a coarse-fine programmable capacitor array, which allows digitizing wide capacitance range in compact area. Analysis for the maximum achievable resolution due to mismatch is provided. The proposed design is insensitive to any reference voltage or current which translates to low temperature sensitivity. The operation of a prototype fabricated in a standard CMOS technology is experimentally verified using both on-chip and off-chip capacitive sensors. Compared to similar prior work, the fabricated prototype achieves and excellent energy efficiency of 34 pJ/step.

Chemical Sensors Based on Metal Oxide Nanostructures

Science.gov (United States)

Hunter, Gary W.; Xu, Jennifer C.; Evans, Laura J.; VanderWal, Randy L.; Berger, Gordon M.; Kulis, Mike J.; Liu, Chung-Chiun

2006-01-01

This paper is an overview of sensor development based on metal oxide nanostructures. While nanostructures such as nanorods show significan t potential as enabling materials for chemical sensors, a number of s ignificant technical challenges remain. The major issues addressed in this work revolve around the ability to make workable sensors. This paper discusses efforts to address three technical barriers related t o the application of nanostructures into sensor systems: 1) Improving contact of the nanostructured materials with electrodes in a microse nsor structure; 2) Controling nanostructure crystallinity to allow co ntrol of the detection mechanism; and 3) Widening the range of gases that can be detected by using different nanostructured materials. It is concluded that while this work demonstrates useful tools for furt her development, these are just the beginning steps towards realizati on of repeatable, controlled sensor systems using oxide based nanostr uctures.

Development of capacitive sensor for automatically measuring tumbler water level with FEA simulation.

Science.gov (United States)

Wei, Qun; Kim, Mi-Jung; Lee, Jong-Ha

2018-01-01

Drinking water has several advantages that have already been established, such as improving blood circulation, reducing acid in the stomach, etc. However, due to people not noticing the amount of water they consume every time they drink, most people drink less water than the recommended daily allowance. In this paper, a capacitive sensor for developing an automatic tumbler to measure water level is proposed. Different than in previous studies, the proposed capacitive sensor was separated into two sets: the main sensor for measuring the water level in the tumbler, and the reference sensor for measuring the incremental level unit. In order to confirm the feasibility of the proposed idea, and to optimize the shape of the sensor, a 3D model of the capacitive sensor with the tumbler was designed and subjected to Finite Element Analysis (FEA) simulation. According to the simulation results, the electrodes were made of copper and assembled in a tumbler manufactured by a 3D printer. The tumbler was filled with water and was subjected to experiments in order to assess the sensor's performance. The comparison of experimental results to the simulation results shows that the measured capacitance value of the capacitive sensor changed linearly as the water level varied. This proves that the proposed sensor can accurately measure the water level in the tumbler. Additionally, by use of the curve fitting method, a compensation algorithm was found to match the actual level with the measured level. The experimental results proved that the proposed capacitive sensor is able to measure the actual water level in the tumbler accurately. A digital control part with micro-processor will be designed and fixed on the bottom of the tumbler for developing a smart tumbler.

Nanomaterials-based electrochemical sensors for nitric oxide

International Nuclear Information System (INIS)

Dang, Xueping; Hu, Hui; Wang, Shengfu; Hu, Shengshui

2015-01-01

Electrochemical sensing has been demonstrated to represent an efficient way to quantify nitric oxide (NO) in challenging physiological environments. A sensing interface based on nanomaterials opens up new opportunities and broader prospects for electrochemical NO sensors. This review (with 141 refs.) gives a general view of recent advances in the development of electrochemical sensors based on nanomaterials. It is subdivided into sections on (i) carbon derived nanomaterials (such as carbon nanotubes, graphenes, fullerenes), (ii) metal nanoparticles (including gold, platinum and other metallic nanoparticles); (iii) semiconductor metal oxide nanomaterials (including the oxides of titanium, aluminum, iron, and ruthenium); and finally (iv) nanocomposites (such as those formed from carbon nanomaterials with nanoparticles of gold, platinum, NiO or TiO 2 ). The various strategies are discussed, and the advances of using nanomaterials and the trends in NO sensor technology are outlooked in the final section. (author)

Molybdenum oxide nanowires based supercapacitors with enhanced capacitance and energy density in ethylammonium nitrate electrolyte

Energy Technology Data Exchange (ETDEWEB)

Sarfraz, Mansoor; Aboud, Mohamed F.A.; Shakir, Imran, E-mail: shakir@skku.edu

2015-11-25

Orthorhombic molybdenum trioxide (α-MoO{sub 3}) nanowires as an electrode for electrochemical supercapacitors in ethylammonium nitrate (EAN) electrolyte exhibits a high specific capacitance of 288 Fg{sup −1}, which is 8 times higher than the specific capacitance obtained from MoO{sub 3} nanowires in water based electrolyte. MoO{sub 3} nanowires in EAN electrolyte exhibit energy density of 46.32 Wh kg{sup −1} at a power density of 20.3 kW kg{sup −1} with outstanding cycling stability with specific capacitance retention of 96% over 3000 cycles. We believe that the superior performance of the MoO{sub 3} nanowires in EAN based electrolyte is primarily due to its relatively low viscosity (0.28 P at 25 °C), high electrical conductivity (20 mS cm{sup −1} at 25 °C) and large working voltage window. The results clearly demonstrate that EAN as electrolyte is one of the most promising electrolyte for high performance large scale energy storage devices. - Highlights: • Synthesis of single crystalline molybdenum oxide nanowires. • Ethylammonium Nitrate as an electrolyte for high performance large scale psuedocapacitor based energy storage devices. • Molybdenum oxide nanowires based electrodes shows 8 fold enhancement in Ethylammonium Nitrate electrolyte as compared to water based electrolytes. • The devices in Ethylammonium Nitrate exhibit excellent stability, retaining 96% of its initial capacity after 3000 cycles.

Capacitive Sensors for Feedback Control of Microfluidic Devices

Science.gov (United States)

Chen, J. Z.; Darhuber, A. A.; Troian, S. M.; Wagner, S.

2003-11-01

Automation of microfluidic devices based on thermocapillary flow [1] requires feedback control and detection techniques for monitoring the location, and ideally also composition and volume of liquid droplets. For this purpose we have developed a co-planar capacitance technique with a sensitivity of 0.07 pF at a frequency of 370 kHz. The variation in capacitance due to the presence of a droplet is monitored by the output frequency of an RC relaxation oscillator consisting of two inverters, one resistor and one capacitor. We discuss the performance of this coplanar sensor as a function of the electrode dimensions and geometry. These geometric variables determine the electric field penetration depth within the liquid, which in our studies ranged from 30 to 450 microns. Numerical solutions for the capacitance corresponding to the exact fabricated geometry agree very well with experimental data. An approximate analytic solution, which ignores fringe field effects, provides a simple but excellent guide for design development. [1] A. A. Darhuber et al., Appl. Phys. Lett. 82, 657 (2003).

A highly sensitive and durable electrical sensor for liquid ethanol using thermally-oxidized mesoporous silicon

Science.gov (United States)

Harraz, Farid A.; Ismail, Adel A.; Al-Sayari, S. A.; Al-Hajry, A.; Al-Assiri, M. S.

2016-12-01

A capacitive detection of liquid ethanol using reactive, thermally oxidized films constructed from electrochemically synthesized porous silicon (PSi) is demonstrated. The sensor elements are fabricated as meso-PSi (pore sizes hydrophobic PSi surface exhibited almost a half sensitivity of the thermal oxide sensor. The response to water is achieved only at the oxidized surface and found to be ∼one quarter of the ethanol sensitivity, dependent on parameters such as vapor pressure and surface tension. The capacitance response retains ∼92% of its initial value after continuous nine cyclic runs and the sensors presumably keep long-term stability after three weeks storage, demonstrating excellent durability and storage stability. The observed behavior in current system is likely explained by the interface interaction due to dipole moment effect. The results suggest that the current sensor structure and design can be easily made to produce notably higher sensitivities for reversible detection of various analytes.

Capacitive sensor for continuous monitoring of high-volume droplet microfluidic generation

KAUST Repository

Conchouso Gonzalez, David

2016-12-19

This paper presents a capacitive sensor for monitoring parallel microfluidic droplet generation. The great electric permittivity difference between common droplet microfluidic fluids such as air, oil and water (ϵoil ≈ 2–3 and ϵwater ≈ 80.4), allows for accurate detection of water in oil concentration changes. Capacitance variations as large as 10 pF between a channel filled with water or dodecane, are used to continuously monitor the output of a parallelization system producing 150 µl/min of water in dodecane emulsions. We also discuss a low cost fabrication process to manufacture these capacitive sensors, which can be integrated to different substrates.

Analysis of small deflection touch mode behavior in capacitive pressure sensors

DEFF Research Database (Denmark)

Fragiacomo, Giulio; Ansbæk, Thor; Pedersen, Thomas

2010-01-01

Due to an increasing need for devices with low power consumption, capacitive pressure sensors have become good substitutes for the well known piezoresistive pressure sensors. Mathematical models are necessary to design and characterize the device, preferably the model is analytical...... such that geometrical scalings are revealed. We show that, in the case of linear elastic behavior, a simple analytical model can be found for a touch mode capacitive pressure sensor (TMCPS). With this model it is possible to readily evaluate the main features of a TMCPS such as: sensitivity (both in normal and touch...... mode), touch point pressure and parasitic capacitance. Therefore, the desired device can be designed without using finite element modeling (FEM). This reduces the effort needed to design a micromachined TMCPS. Finally, the model has been compared with a micromachined TMCPS showing an excellent...

Preparatory research for development of a capacitance sensor monitoring the liquid fraction in an inclined pipe

International Nuclear Information System (INIS)

Ko, Min Seok; Lee, Bo An; Kim, Sin; Yun, Byong Jo

2012-01-01

Two phase flow is a highly general phenomenon in various engineering fields including thermal hydraulic systems of the nuclear power plant. In particular, the liquid fraction in two phase system is one of the most important parameters to be considered for efficient system design and analysis. There have been various methods for the liquid fraction measurement. Wojtan et al. employed an optical fiber for liquid fraction measurement. Elbow and Rezkallah adopted the capacitance signal, Tsochatzidis et al. and Fossa used the conductance response in order to monitor the liquid fraction in various two phase flow regimes. The electrical methods are based on the fact that the liquid and gas have different conductivity and permittivity values, and these electrical properties directly correspond to phase distributions. In the capacitance method, in particular, one or more pairs of electrodes attached inside or outside the pipe wall measure the capacitance between electrode pairs and this measured capacitance signal is directly converted to the liquid fraction. In this work, as a preparatory research for development of a capacitance sensor monitoring the liquid fraction in an inclined pipe whose diameter and inclination angle are 45mm and 3rad, respectively, a capacitance is designed. Also, data evaluation procedures of a wire mesh sensor which would be employed for the verification of capacitance sensor performance are verified by comparing static experiments

A capacitive CMOS-MEMS sensor designed by multi-physics simulation for integrated CMOS-MEMS technology

Science.gov (United States)

Konishi, Toshifumi; Yamane, Daisuke; Matsushima, Takaaki; Masu, Kazuya; Machida, Katsuyuki; Toshiyoshi, Hiroshi

2014-01-01

This paper reports the design and evaluation results of a capacitive CMOS-MEMS sensor that consists of the proposed sensor circuit and a capacitive MEMS device implemented on the circuit. To design a capacitive CMOS-MEMS sensor, a multi-physics simulation of the electromechanical behavior of both the MEMS structure and the sensing LSI was carried out simultaneously. In order to verify the validity of the design, we applied the capacitive CMOS-MEMS sensor to a MEMS accelerometer implemented by the post-CMOS process onto a 0.35-µm CMOS circuit. The experimental results of the CMOS-MEMS accelerometer exhibited good agreement with the simulation results within the input acceleration range between 0.5 and 6 G (1 G = 9.8 m/s2), corresponding to the output voltages between 908.6 and 915.4 mV, respectively. Therefore, we have confirmed that our capacitive CMOS-MEMS sensor and the multi-physics simulation will be beneficial method to realize integrated CMOS-MEMS technology.

Capacitive tool standoff sensor for dismantlement tasks

International Nuclear Information System (INIS)

Schmitt, D.J.; Weber, T.M.; Liu, J.C.

1996-01-01

A capacitive sensing technology has been applied to develop a Standoff Sensor System for control of robotically deployed tools utilized in Decontamination and Dismantlement (D and D) activities. The system combines four individual sensor elements to provide non-contact, multiple degree-of-freedom control of tools at distances up to five inches from a surface. The Standoff Sensor has been successfully integrated to a metal cutting router and a pyrometer, and utilized for real-time control of each of these tools. Experiments demonstrate that the system can locate stationary surfaces with a repeatability of 0.034 millimeters

Highly Sensitive Temperature Sensors Based on Fiber-Optic PWM and Capacitance Variation Using Thermochromic Sensing Membrane

Directory of Open Access Journals (Sweden)

Md. Rajibur Rahaman Khan

2016-07-01

Full Text Available In this paper, we propose a temperature/thermal sensor that contains a Rhodamine-B sensing membrane. We applied two different sensing methods, namely, fiber-optic pulse width modulation (PWM and an interdigitated capacitor (IDC-based temperature sensor to measure the temperature from 5 °C to 100 °C. To the best of our knowledge, the fiber-optic PWM-based temperature sensor is reported for the first time in this study. The proposed fiber-optic PWM temperature sensor has good sensing ability; its sensitivity is ~3.733 mV/°C. The designed temperature-sensing system offers stable sensing responses over a wide dynamic range, good reproducibility properties with a relative standard deviation (RSD of ~0.021, and the capacity for a linear sensing response with a correlation coefficient of R2 ≈ 0.992 over a wide sensing range. In our study, we also developed an IDC temperature sensor that is based on the capacitance variation principle as the IDC sensing element is heated. We compared the performance of the proposed temperature-sensing systems with different fiber-optic temperature sensors (which are based on the fiber-optic wavelength shift method, the long grating fiber-optic Sagnac loop, and probe type fiber-optics in terms of sensitivity, dynamic range, and linearity. We observed that the proposed sensing systems have better sensing performance than the above-mentioned sensing system.

Design, Development and Testing of a Semicircular Type Capacitive Angular Position Sensor

Directory of Open Access Journals (Sweden)

Nikhil GAURAV

2011-06-01

Full Text Available A low cost semicircular type capacitive angular position sensor has been designed, developed and tested. It is made of two semicircular parallel plates where one plate is fixed and another plate is connected with the rotor whose angular position is to be measured. When the angular position of the rotor changes with respect to the fixed plate, the overlapping area between the two plates of the capacitor is varied causing a change in capacitance value. Capacitance variation obtained due to the change in angular position is in the nano farad range. For signal conditioning, series R-L-C resonating circuit instead of conventional bridge circuit has been used to convert the sensor capacitance variation in to voltage. Experimental result shows that the capacitance for change in angular position 0º-180º increases linearly and for 180º-360º it decreases linearly. To get a linearly increasing response of same slope for the full scale of 0º-360º, a suitable linearising circuit has been designed, developed and tested. Sensor output along with the signal conditioning shows good linearity and repeatability.

Force Sensitive Handles and Capacitive Touch Sensor for Driving a Flexible Haptic-Based Immersive System

OpenAIRE

Covarrubias, Mario; Bordegoni, Monica; Cugini, Umberto

2013-01-01

In this article, we present an approach that uses both two force sensitive handles (FSH) and a flexible capacitive touch sensor (FCTS) to drive a haptic-based immersive system. The immersive system has been developed as part of a multimodal interface for product design. The haptic interface consists of a strip that can be used by product designers to evaluate the quality of a 3D virtual shape by using touch, vision and hearing and, also, to interactively change the shape of the virtual object...

Pulse-Driven Capacitive Lead Ion Detection with Reduced Graphene Oxide Field-Effect Transistor Integrated with an Analyzing Device for Rapid Water Quality Monitoring.

Science.gov (United States)

Maity, Arnab; Sui, Xiaoyu; Tarman, Chad R; Pu, Haihui; Chang, Jingbo; Zhou, Guihua; Ren, Ren; Mao, Shun; Chen, Junhong

2017-11-22

Rapid and real-time detection of heavy metals in water with a portable microsystem is a growing demand in the field of environmental monitoring, food safety, and future cyber-physical infrastructure. Here, we report a novel ultrasensitive pulse-driven capacitance-based lead ion sensor using self-assembled graphene oxide (GO) monolayer deposition strategy to recognize the heavy metal ions in water. The overall field-effect transistor (FET) structure consists of a thermally reduced graphene oxide (rGO) channel with a thin layer of Al 2 O 3 passivation as a top gate combined with sputtered gold nanoparticles that link with the glutathione (GSH) probe to attract Pb 2+ ions in water. Using a preprogrammed microcontroller, chemo-capacitance based detection of lead ions has been demonstrated with this FET sensor. With a rapid response (∼1-2 s) and negligible signal drift, a limit of detection (LOD) water stabilization followed by lead ion testing and calculation is much shorter than common FET resistance/current measurements (∼minutes) and other conventional methods, such as optical and inductively coupled plasma methods (∼hours). An approximate linear operational range (5-20 ppb) around 15 ppb (the maximum contaminant limit by US Environmental Protection Agency (EPA) for lead in drinking water) makes it especially suitable for drinking water quality monitoring. The validity of the pulse method is confirmed by quantifying Pb 2+ in various real water samples such as tap, lake, and river water with an accuracy ∼75%. This capacitance measurement strategy is promising and can be readily extended to various FET-based sensor devices for other targets.

Design of interdigital spiral and concentric capacitive sensors for materials evaluation

Science.gov (United States)

Chen, Tianming; Bowler, Nicola

2013-01-01

This paper describes the design of two circular coplanar interdigital sensors with i) a spiral interdigital configuration and ii) a concentric interdigital configuration for the nondestructive evaluation of multilayered dielectric structures. A numerical model accounting for sensor geometry, test-piece geometry and real permittivity, and metal electrode thickness has been developed to calculate the capacitance of the sensors when in contact with a planar test-piece comprising up to four layers. Compared with a disk-and-ring coplanar capacitive sensor developed previously, the interdigital configurations are predicted to have higher signal-to-noise ratio and better accuracy in materials characterization. The disk-and-ring configuration, on the other hand, possesses advantages such as deeper penetration depth and better immunity to lift-off variations.

Development of Electrical Capacitance Sensors for Accident Tolerant Fuel (ATF) Testing at the Transient Reactor Test (TREAT) Facility

Energy Technology Data Exchange (ETDEWEB)

Liu, Maolong; Ryals, Matthew; Ali, Amir; Blandford, Edward; Jensen, Colby; Condie, Keith; Svoboda, John; O' Brien, Robert

2016-08-01

A variety of instruments are being developed and qualified to support the Accident Tolerant Fuels (ATF) program and future transient irradiations at the Transient Reactor Test (TREAT) facility at Idaho National Laboratory (INL). The University of New Mexico (UNM) is working with INL to develop capacitance-based void sensors for determining the timing of critical boiling phenomena in static capsule fuel testing and the volume-averaged void fraction in flow-boiling in-pile water loop fuel testing. The static capsule sensor developed at INL is a plate-type configuration, while UNM is utilizing a ring-type capacitance sensor. Each sensor design has been theoretically and experimentally investigated at INL and UNM. Experiments are being performed at INL in an autoclave to investigate the performance of these sensors under representative Pressurized Water Reactor (PWR) conditions in a static capsule. Experiments have been performed at UNM using air-water two-phase flow to determine the sensitivity and time response of the capacitance sensor under a flow boiling configuration. Initial measurements from the capacitance sensor have demonstrated the validity of the concept to enable real-time measurement of void fraction. The next steps include designing the cabling interface with the flow loop at UNM for Reactivity Initiated Accident (RIA) ATF testing at TREAT and further characterization of the measurement response for each sensor under varying conditions by experiments and modeling.

Packaged Capacitive Pressure Sensor System for Aircraft Engine Health Monitoring

Science.gov (United States)

Scardelletti, Maximilian C.; Zorman, Christian A.

2016-01-01

This paper describes the development of a packaged silicon carbide (SiC) based MEMS pressure sensor system designed specifically for a conventional turbofan engine. The electronic circuit is based on a Clapp-type oscillator that incorporates a 6H-SiC MESFET, a SiCN MEMS capacitive pressure sensor, titanate MIM capacitors, wirewound inductors, and thick film resistors. The pressure sensor serves as the capacitor in the LC tank circuit, thereby linking pressure to the resonant frequency of the oscillator. The oscillator and DC bias circuitry were fabricated on an alumina substrate and secured inside a metal housing. The packaged sensing system reliably operates at 0 to 350 psi and 25 to 540C. The system has a pressure sensitivity of 6.8 x 10E-2 MHzpsi. The packaged system shows negligible difference in frequency response between 25 and 400C. The fully packaged sensor passed standard benchtop acceptance tests and was evaluated on a flight-worthy engine.

Design, Development and Testing of a Semi Cylindrical Capacitive Sensor for Liquid Level Measurement

Directory of Open Access Journals (Sweden)

Sagarika PAL

2010-05-01

Full Text Available In the present paper a low cost noncontact semi cylindrical capacitive type liquid level sensor has been designed, developed and tested. The semi cylindrical capacitive sensor consisting of two thin semi cylindrical metal plates separated by a gap distance and mounted around a non conducting storage tank, has been used to measure the liquid level in the tank. The measured capacitance variation with variation of liquid level is linear and obtained in the nano farad range which again has been converted into voltage variation by using proper signal conditioning circuit. Since the sensor is noncontact type it can be used for both conducting and non conducting type of liquid contained within a non conducting tank. For converting the capacitance variation in to voltage variation a series R-L-C resonating circuit has been used instead of conventional bridge circuit. Experimental results confirm the satisfactory performance of the sensor for liquid level measurement.

A dual-mode proximity sensor with integrated capacitive and temperature sensing units

International Nuclear Information System (INIS)

Qiu, Shihua; Huang, Ying; He, Xiaoyue; Sun, Zhiguang; Liu, Ping; Liu, Caixia

2015-01-01

The proximity sensor is one of the most important devices in the field of robot application. It can accurately provide the proximity information to assistant robots to interact with human beings and the external environment safely. In this paper, we have proposed and demonstrated a dual-mode proximity sensor composed of capacitive and resistive sensing units. We defined the capacitive type proximity sensor perceiving the proximity information as C-mode and the resistive type proximity sensor detecting as R-mode. Graphene nanoplatelets (GNPs) were chosen as the R-mode sensing material because of its high performance. The dual-mode proximity sensor presents the following features: (1) the sensing distance of the dual-mode proximity sensor has been enlarged compared with the single capacitive proximity sensor in the same geometrical pattern; (2) experiments have verified that the proposed sensor can sense the proximity information of different materials; (3) the proximity sensing capability of the sensor has been improved by two modes perceive collaboratively, for a plastic block at a temperature of 60 °C: the R-mode will perceive the proximity information when the distance d between the sensor and object is 6.0–17.0 mm and the C-mode will do that when their interval is 0–2.0 mm; additionally two modes will work together when the distance is 2.0–6.0 mm. These features indicate our transducer is very valuable in skin-like sensing applications. (paper)

Experience gained with capacitive pressure sensor noise analysis

International Nuclear Information System (INIS)

Ballestrin, J.; Blazquez, J.

1996-01-01

Due to safety requirements, pressure sensors in a nuclear power plant must be kept under surveillance. The dynamics of the capacitive type Rosemount sensors is known. Sensor response time to a pressure ramp is the usual quantity required and it can be calculated. The noise signals contain the sensor dynamics, but in this case other irrelevant information from the plant is held, which disturbs the results. So, the signals must be conditioned previously. Also, it is necessary to do a process in order to separate the pressure sensor dynamics and to get a stationary signal. This can be done by using the autocorrelation function and filtering. Deterministic steps have been made and a relationship between the sensor response time, and the static pressure has been found. (author)

MEMS capacitive pressure sensor monolithically integrated with CMOS readout circuit by using post CMOS processes

Science.gov (United States)

Jang, Munseon; Yun, Kwang-Seok

2017-12-01

In this paper, we presents a MEMS pressure sensor integrated with a readout circuit on a chip for an on-chip signal processing. The capacitive pressure sensor is formed on a CMOS chip by using a post-CMOS MEMS processes. The proposed device consists of a sensing capacitor that is square in shape, a reference capacitor and a readout circuitry based on a switched-capacitor scheme to detect capacitance change at various environmental pressures. The readout circuit was implemented by using a commercial 0.35 μm CMOS process with 2 polysilicon and 4 metal layers. Then, the pressure sensor was formed by wet etching of metal 2 layer through via hole structures. Experimental results show that the MEMS pressure sensor has a sensitivity of 11 mV/100 kPa at the pressure range of 100-400 kPa.

Use of capacitive sensors with the instantaneous profile method to determine hydraulic conductivity

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Eurileny Lucas de Almeida

Full Text Available ABSTRACT Due to the need to monitor soil water tension continuously, the instantaneous profile method is considered laborious, requiring a lot of time, and especially manpower, to set up and maintain. The aim of this work was to evaluate the possibility of using capacitive sensors in place of tensiometers with the instantaneous profile method in an area of the Lower Acaraú Irrigated Perimeter. The experiment was carried out in a Eutrophic Red-Yellow Argisol. The sensors were installed 15, 30, 45 and 60 cm from the surface, and powered by photovoltaic panels, using a power manager to charge the battery and to supply power at night. Records from the capacitive sensors were collected every five minutes and stored on a data acquisition board. With the simultaneous measurement of soil moisture obtained by the sensors, and the total soil water potential from the soil water retention curve, it was possible to determine the hydraulic conductivity as a function of the volumetric water content for each period using the Richards equation. At the end of the experiment, the advantage of using capacitive sensors with the instantaneous profile method was confirmed as an alternative to using a tensiometer. The main advantages of using capacitive sensors were to make the method less laborious and to allow moisture readings at higher tensions in soils of a sandy texture.

Development and analysis of a capacitive touch sensor using a liquid metal droplet

International Nuclear Information System (INIS)

Baek, Seungbum; Won, Dong-Joon; Kim, Joong Gil; Kim, Joonwon

2015-01-01

In this paper, we introduce a small-sized capacitive touch sensor with large variations in its capacitance. This sensor uses the changes in capacitance caused by the variation of the overlap area between a liquid metal (LM) droplet and a flat electrode while keeping the gap between the droplet and the bottom electrode at a small constant value (i.e. thickness of dielectric layer). Initially, the droplet is placed inside a polydimethylsiloxane (PDMS) chamber, and a thin silicon dioxide film separates the droplet and the electrode. Owing to the high surface tension of the LM, the droplet retains its spherical shape and the overlap area remains small, which means that the capacitance between the droplet and the electrode also remains small. When normal force is applied, the pressure on the membrane pushes the droplet downward, thus spreading the droplet to the bottom of the chamber and increasing the capacitance. To verify our concept, we performed theoretical analyses and experiments using a 2 mm  ×  2 mm  ×  2 mm 1-cell touch sensor. Finally, we obtained a capacitance variation of ∼30 pF by applying forces between 0 N and 1 N. (paper)

Silicon Carbide-Based Hydrogen Gas Sensors for High-Temperature Applications

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Sangchoel Kim

2013-10-01

Full Text Available We investigated SiC-based hydrogen gas sensors with metal-insulator-semiconductor (MIS structure for high temperature process monitoring and leak detection applications in fields such as the automotive, chemical and petroleum industries. In this work, a thin tantalum oxide (Ta2O5 layer was exploited with the purpose of sensitivity improvement, because tantalum oxide has good stability at high temperature with high permeability for hydrogen gas. Silicon carbide (SiC was used as a substrate for high-temperature applications. We fabricated Pd/Ta2O5/SiC-based hydrogen gas sensors, and the dependence of their I-V characteristics and capacitance response properties on hydrogen concentrations were analyzed in the temperature range from room temperature to 500 °C. According to the results, our sensor shows promising performance for hydrogen gas detection at high temperatures.

Ag/PEPC/NiPc/ZnO/Ag thin film capacitive and resistive humidity sensors

International Nuclear Information System (INIS)

Karimov, Kh. S.; Saleem, M.; Murtaza, Imran; Farooq, M.; Cheong, Kuan Yew; Noor, Ahmad Fauzi Mohd

2010-01-01

A thin film of blended poly-N-epoxypropylcarbazole (PEPC) (25 wt.%), nickel phthalocyanine (NiPc) (50 wt.%) and ZnO nano-powder (25 wt.%) in benzene (5 wt.%) was spin-coated on a glass substrate with silver electrodes to produce a surface-type Ag/PEPC/NiPc/ZnO/Ag capacitive and resistive sensor. Sensors with two different PEPC/NiPc/ZnO film thicknesses (330 and 400 nm) were fabricated and compared. The effects of humidity on capacitance and resistance of the Ag/PEPC/NiPc/ZnO/Ag sensors were investigated at two frequencies of the applied voltage: 120 Hz and 1 kHz. It was observed that at 120 Hz under humidity of up to 95% RH the capacitance of the sensors increased by 540 times and resistance decreased by 450 times with respect to humidity conditions of 50% RH. It was found that the sensor with a thinner semiconducting film (330 nm) was more sensitive than the sensor with a thicker film (400 nm). The sensitivity was improved when the sensor was used at a lower frequency as compared with a high frequency. It is assumed that the humidity response of the sensors is associated with absorption of water vapors and doping of water molecules in the semiconductor blend layer. This had been proven by simulation of the capacitance-humidity relationship. (semiconductor devices)

A Capacitance-To-Digital Converter for MEMS Sensors for Smart Applications.

Science.gov (United States)

Pérez Sanjurjo, Javier; Prefasi, Enrique; Buffa, Cesare; Gaggl, Richard

2017-06-07

The use of MEMS sensors has been increasing in recent years. To cover all the applications, many different readout circuits are needed. To reduce the cost and time to market, a generic capacitance-to-digital converter (CDC) seems to be the logical next step. This work presents a configurable CDC designed for capacitive MEMS sensors. The sensor is built with a bridge of MEMS, where some of them function with pressure. Then, the capacitive to digital conversion is realized using two steps. First, a switched-capacitor (SC) preamplifier is used to make the capacitive to voltage (C-V) conversion. Second, a self-oscillated noise-shaping integrating dual-slope (DS) converter is used to digitize this magnitude. The proposed converter uses time instead of amplitude resolution to generate a multibit digital output stream. In addition it performs noise shaping of the quantization error to reduce measurement time. This article shows the effectiveness of this method by measurements performed on a prototype, designed and fabricated using standard 0.13 µm CMOS technology. Experimental measurements show that the CDC achieves a resolution of 17 bits, with an effective area of 0.317 mm², which means a pressure resolution of 1 Pa, while consuming 146 µA from a 1.5 V power supply.

MOFs for the Sensitive Detection of Ammonia: Deployment of fcu-MOF Thin Films as Effective Chemical Capacitive Sensors.

Science.gov (United States)

Assen, Ayalew H; Yassine, Omar; Shekhah, Osama; Eddaoudi, Mohamed; Salama, Khaled N

2017-09-22

This work reports on the fabrication and deployment of a select metal-organic framework (MOF) thin film as an advanced chemical capacitive sensor for the sensing/detection of ammonia (NH 3 ) at room temperature. Namely, the MOF thin film sensing layer consists of a rare-earth (RE) MOF (RE-fcu-MOF) deposited on a capacitive interdigitated electrode (IDE). Purposely, the chemically stable naphthalene-based RE-fcu-MOF (NDC-Y-fcu-MOF) was elected and prepared/arranged as a thin film on a prefunctionalized capacitive IDE via the solvothermal growth method. Unlike earlier realizations, the fabricated MOF-based sensor showed a notable detection sensitivity for NH 3 at concentrations down to 1 ppm, with a detection limit appraised to be around 100 ppb (at room temperature) even in the presence of humidity and/or CO 2 . Distinctly, the NDC-Y-fcu-MOF based sensor exhibited the required stability to NH 3 , in contrast to other reported MOFs, and a remarkable detection selectivity toward NH 3 vs CH 4 , NO 2 , H 2 , and C 7 H 8 . The NDC-Y-fcu-MOF based sensor exhibited excellent performance for sensing ammonia for simulated breathing system in the presence of the mixture of carbon dioxide and/or humidity (water vapor), with no major alteration in the detection signal.

An Integrated Instrumentation System for Velocity, Concentration and Mass Flow Rate Measurement of Solid Particles Based on Electrostatic and Capacitance Sensors

Directory of Open Access Journals (Sweden)

Jian Li

2015-12-01

Full Text Available The online and continuous measurement of velocity, concentration and mass flow rate of pneumatically conveyed solid particles for the high-efficiency utilization of energy and raw materials has become increasingly significant. In this paper, an integrated instrumentation system for the velocity, concentration and mass flow rate measurement of dense phase pneumatically conveyed solid particles based on electrostatic and capacitance sensorsis developed. The electrostatic sensors are used for particle mean velocity measurement in combination with the cross-correlation technique, while the capacitance sensor with helical surface-plate electrodes, which has relatively homogeneous sensitivity distribution, is employed for the measurement of particle concentration and its capacitance is measured by an electrostatic-immune AC-based circuit. The solid mass flow rate can be further calculated from the measured velocity and concentration. The developed instrumentation system for velocity and concentration measurement is verified and calibrated on a pulley rig and through static experiments, respectively. Finally the system is evaluated with glass beads on a gravity-fed rig. The experimental results demonstrate that the system is capable of the accurate solid mass flow rate measurement, and the relative error is within −3%–8% for glass bead mass flow rates ranging from 0.13 kg/s to 0.9 kg/s.

A frequency output ferroelectric phase PNZT capacitor-based temperature sensor

KAUST Repository

Khan, Naveed

2016-09-05

In this paper, a frequency output temperature sensor based on a 4% Niobium doped 20/80 Zr/Ti Lead Zirconate Titanate (PNZT) capacitor is proposed. The sensor capacitance vs temperature and capacitance vs voltage characteristics are experimentally measured below the Curie temperature of the ferroelectric capacitor. The capacitance of the 20/80 (Zr/Ti) composition PNZT capacitor changes by 29% for a temperature change from 10°C to 100°C, which translates to 0.32%/°C temperature sensitivity. The measured sensor characteristics show less than ∼0.7°C deviation from the ideal linear response. A Wien bridge oscillator based temperature sensor is demonstrated based on the PNZT capacitors. Mathematical analysis for the effect of the op-amp finite unity-gain frequency on the sensor circuit oscillation frequency is provided. The experimentally realized frequency output temperature sensor shows -17.6% relative frequency change for a temperature change from 10°C to 100°C. The proposed capacitive temperature sensor can be used in low-power smart sensor nodes without the need for extensive calibration. © 2015 IEEE.

Functionalized Ga2O3 nanowires as active material in room temperature capacitance-based gas sensors.

Science.gov (United States)

Mazeina, Lena; Perkins, F Keith; Bermudez, Victor M; Arnold, Stephen P; Prokes, S M

2010-08-17

We report the first evidence for functionalization of Ga(2)O(3) nanowires (NWs), which have been incorporated as the active material in room temperature capacitance gas-sensing devices. An adsorbed layer of pyruvic acid (PA) was successfully formed on Ga(2)O(3) NWs by simple room temperature vapor transport, which was confirmed by Fourier transform infrared spectroscopy. The effect of the adsorbed PA on the surface properties was demonstrated by the change in the response of the NW gas-sensing devices. Results indicate that the adsorption of PA reduced the sensitivity of the Ga(2)O(3) NW device to common hydrocarbons such as nitromethane and acetone while improving the response to triethylamine by an order of magnitude. Taking into account the simplicity of this functionalization together with the ease of producing these capacitance-based gas-sensing devices, this approach represents a viable technique for sensor development.

A novel flexible capacitive touch pad based on graphene oxide film

Science.gov (United States)

Tian, He; Yang, Yi; Xie, Dan; Ren, Tian-Ling; Shu, Yi; Zhou, Chang-Jian; Sun, Hui; Liu, Xuan; Zhang, Cang-Hai

2013-01-01

Recently, graphene oxide (GO) supercapacitors with ultra-high energy densities have received significant attention. In addition to energy storage, GO capacitors might also have broad applications in renewable energy engineering, such as vibration and sound energy harvesting. Here, we experimentally create a macroscopic flexible capacitive touch pad based on GO film. An obvious touch ``ON'' to ``OFF'' voltage ratio up to ~60 has been observed. Moreover, we tested the capacitor structure on both flat and curved surfaces and it showed high response sensitivity under fast touch rates. Collectively, our results raise the exciting prospect that the realization of macroscopic flexible keyboards with large-area graphene based materials is technologically feasible, which may open up important applications in control and interface design for solar cells, speakers, supercapacitors, batteries and MEMS systems.

A novel flexible capacitive touch pad based on graphene oxide film.

Science.gov (United States)

Tian, He; Yang, Yi; Xie, Dan; Ren, Tian-Ling; Shu, Yi; Zhou, Chang-Jian; Sun, Hui; Liu, Xuan; Zhang, Cang-Hai

2013-02-07

Recently, graphene oxide (GO) supercapacitors with ultra-high energy densities have received significant attention. In addition to energy storage, GO capacitors might also have broad applications in renewable energy engineering, such as vibration and sound energy harvesting. Here, we experimentally create a macroscopic flexible capacitive touch pad based on GO film. An obvious touch "ON" to "OFF" voltage ratio up to ∼60 has been observed. Moreover, we tested the capacitor structure on both flat and curved surfaces and it showed high response sensitivity under fast touch rates. Collectively, our results raise the exciting prospect that the realization of macroscopic flexible keyboards with large-area graphene based materials is technologically feasible, which may open up important applications in control and interface design for solar cells, speakers, supercapacitors, batteries and MEMS systems.

Manganese oxide micro-supercapacitors with ultra-high areal capacitance

Science.gov (United States)

Wang, Xu; Myers, Benjamin D.; Yan, Jian; Shekhawat, Gajendra; Dravid, Vinayak; Lee, Pooi See

2013-05-01

A symmetric micro-supercapacitor is constructed by electrochemically depositing manganese oxide onto micro-patterned current collectors. High surface-to-volume ratio of manganese oxide and short diffusion distance between electrodes give an ultra-high areal capacitance of 56.3 mF cm-2 at a current density of 27.2 μA cm-2.A symmetric micro-supercapacitor is constructed by electrochemically depositing manganese oxide onto micro-patterned current collectors. High surface-to-volume ratio of manganese oxide and short diffusion distance between electrodes give an ultra-high areal capacitance of 56.3 mF cm-2 at a current density of 27.2 μA cm-2. Electronic supplementary information (ESI) available: Experimental procedures; optical images of micro-supercapacitors; areal capacitances of samples M-0.3C, M-0.6C and M-0.9C; illustration of interdigital finger electrodes; Nyquist plot of Co(OH)2 deposited on micro-electrodes. See DOI: 10.1039/c3nr00210a

Incorporating a hybrid urease-carbon nanotubes sensitive nanofilm on capacitive field-effect sensors for urea detection.

Science.gov (United States)

Siqueira, José R; Molinnus, Denise; Beging, Stefan; Schöning, Michael J

2014-06-03

The ideal combination among biomolecules and nanomaterials is the key for reaching biosensing units with high sensitivity. The challenge, however, is to find out a stable and sensitive film architecture that can be incorporated on the sensor's surface. In this paper, we report on the benefits of incorporating a layer-by-layer (LbL) nanofilm of polyamidoamine (PAMAM) dendrimer and carbon nanotubes (CNTs) on capacitive electrolyte-insulator-semiconductor (EIS) field-effect sensors for detecting urea. Three sensor arrangements were studied in order to investigate the adequate film architecture, involving the LbL film with the enzyme urease: (i) urease immobilized directly onto a bare EIS [EIS-urease] sensor; (ii) urease atop the LbL film over the EIS [EIS-(PAMAM/CNT)-urease] sensor; and (iii) urease sandwiched between the LbL film and another CNT layer [EIS-(PAMAM/CNT)-urease-CNT]. The surface morphology of all three urea-based EIS biosensors was investigated by atomic force microscopy (AFM), while the biosensing abilities were studied by means of capacitance-voltage (C/V) and dynamic constant-capacitance (ConCap) measureaments at urea concentrations ranging from 0.1 mM to 100 mM. The EIS-urease and EIS-(PAMAM/CNT)-urease sensors showed similar sensitivity (~18 mV/decade) and a nonregular signal behavior as the urea concentration increased. On the other hand, the EIS-(PAMAM/CNT)-urease-CNT sensor exhibited a superior output signal performance and higher sensitivity of about 33 mV/decade. The presence of the additional CNT layer was decisive to achieve a urea based EIS sensor with enhanced properties. Such sensitive architecture demonstrates that the incorporation of an adequate hybrid enzyme-nanofilm as sensing unit opens new prospects for biosensing applications using the field-effect sensor platform.

Thermal sensor based zinc oxide diode for low temperature applications

Energy Technology Data Exchange (ETDEWEB)

Ocaya, R.O. [Department of Physics, University of the Free State (South Africa); Al-Ghamdi, Ahmed [Department of Physics, Faculty of Science, King Abdulaziz University, Jeddah, 21589 (Saudi Arabia); El-Tantawy, F. [Department of Physics, Faculty of Science, Suez Canal University, Ismailia (Egypt); Center of Nanotechnology, King Abdulaziz University, Jeddah (Saudi Arabia); Farooq, W.A. [Department of Physics and Astronomy, College of Science, King Saud University, Riyadh (Saudi Arabia); Yakuphanoglu, F., E-mail: fyhan@hotmail.com [Department of Physics, Faculty of Science, King Abdulaziz University, Jeddah, 21589 (Saudi Arabia); Department of Physics, Faculty of Science, Firat University, Elazig, 23169 (Turkey)

2016-07-25

The device parameters of Al/p-Si/Zn{sub 1-x}Al{sub x}O-NiO/Al Schottky diode for x = 0.005 were investigated over the 50 K–400 K temperature range using direct current–voltage (I–V) and impedance spectroscopy. The films were prepared using the sol–gel method followed by spin-coating on p-Si substrate. The ideality factor, barrier height, resistance and capacitance of the diode were found to depend on temperature. The calculated barrier height has a mean. Capacitance–voltage (C–V) measurements show that the capacitance decreases with increasing frequency, suggesting a continuous distribution of interface states over the surveyed 100 kHz to 1 MHz frequency range. The interface state densities, N{sub ss}, of the diode were calculated and found to peak as functions of bias and temperature in two temperature regions of 50 K–300 K and 300 K–400 K. A peak value of approximately 10{sup 12}/eV cm{sup 2} was observed around 0.7 V bias for 350 K and at 3 × 10{sup 12}/eVcm{sup 2} around 2.2 V bias for 300 K. The relaxation time was found to average 4.7 μs over all the temperatures, but showing its lowest value of 1.58 μs at 300 K. It is seen that the interface states of the diode is controlled by the temperature. This suggests that Al/p-Si/Zn1-xAlxO-NiO/Al diode can be used as a thermal sensors for low temperature applications. - Highlights: • Al/pSi/Zn1-xAlxO-NiO/Al Schottky diode was fabricated by sol gel method. • The interface state density of the diode is controlled by the temperature. • Zinc oxide based diode can be used as a thermal sensor for low temperature applications.

Electrochemical and Capacitive Properties of Carbon Dots/Reduced Graphene Oxide Supercapacitors.

Science.gov (United States)

Dang, Yong-Qiang; Ren, Shao-Zhao; Liu, Guoyang; Cai, Jiangtao; Zhang, Yating; Qiu, Jieshan

2016-11-14

There is much recent interest in graphene-based composite electrode materials because of their excellent mechanical strengths, high electron mobilities, and large specific surface areas. These materials are good candidates for applications in supercapacitors. In this work, a new graphene-based electrode material for supercapacitors was fabricated by anchoring carbon dots (CDs) on reduced graphene oxide (rGO). The capacitive properties of electrodes in aqueous electrolytes were systematically studied by galvanostatic charge-discharge measurements, cyclic voltammetry, and electrochemical impedance spectroscopy. The capacitance of rGO was improved when an appropriate amount of CDs were added to the material. The CD/rGO electrode exhibited a good reversibility, excellent rate capability, fast charge transfer, and high specific capacitance in 1 M H₂SO₄. Its capacitance was as high as 211.9 F/g at a current density of 0.5 A/g. This capacitance was 74.3% higher than that of a pristine rGO electrode (121.6 F/g), and the capacitance of the CD/rGO electrode retained 92.8% of its original value after 1000 cycles at a CDs-to-rGO ratio of 5:1.

Electrochemical and Capacitive Properties of Carbon Dots/Reduced Graphene Oxide Supercapacitors

Directory of Open Access Journals (Sweden)

Yong-Qiang Dang

2016-11-01

Full Text Available There is much recent interest in graphene-based composite electrode materials because of their excellent mechanical strengths, high electron mobilities, and large specific surface areas. These materials are good candidates for applications in supercapacitors. In this work, a new graphene-based electrode material for supercapacitors was fabricated by anchoring carbon dots (CDs on reduced graphene oxide (rGO. The capacitive properties of electrodes in aqueous electrolytes were systematically studied by galvanostatic charge-discharge measurements, cyclic voltammetry, and electrochemical impedance spectroscopy. The capacitance of rGO was improved when an appropriate amount of CDs were added to the material. The CD/rGO electrode exhibited a good reversibility, excellent rate capability, fast charge transfer, and high specific capacitance in 1 M H2SO4. Its capacitance was as high as 211.9 F/g at a current density of 0.5 A/g. This capacitance was 74.3% higher than that of a pristine rGO electrode (121.6 F/g, and the capacitance of the CD/rGO electrode retained 92.8% of its original value after 1000 cycles at a CDs-to-rGO ratio of 5:1.

Nature inspired capacitive sensor with unique and unclonable characteristic

Science.gov (United States)

Karuthedath, C. B.; Schwesinger, N.

2018-02-01

Background of this paper is the development of sensors showing a nature like characteristic. The sensor is able to detect excitations on inertia bases and operates capacitive. It consists of a miniaturized interdigitated electrode structure on a printed circuit board, a flexible and conductive membrane of PDMS located in a certain distance above and a certain number of steel balls fixed on top of the membrane. The steel ball distribution is random and the conductivity of the membrane is not homogeneous across the membrane. Due to this double random distribution, no sensor equals the other, although the external geometry is equal. The overall size of the sensor is 4.7mm x 4.7mm x 1.7mm. Tilt, acceleration or magnetic fields are capable of causing forces on the steel balls and therefore relative movements between the membrane and the electrode structures. Due to this movement, capacity changes of the arrangement are measurable. This paper describes besides the fabrication of conductive membranes the preparation of regarding sensors. Process technology makes cloning of the sensors impossible. Although all process steps are suited for mass production, no sensor equals the other. Measurements with these sensors prove that each sensor reacts differently to the same excitation. Calculations of the Intra-Concordance-Coefficient show the similarity of the sensors for equal excitations. On the other hand, the maximum Inter-Concordance-Coefficient reveals the differences of such sensors very clearly. Such a characteristic, i.e. equal reaction to equal excitation and an output of significantly different signals allows considering each sensor as a unique device. The sensors obviously behave like receptors in natural organisms. These unusual properties of uniqueness and impossibility to clone make the sensors very interesting for highly secure identification demands. In combination with a very simple measurement procedure, the sensors are an attractive hardware base for

3D printed stretchable capacitive sensors for highly sensitive tactile and electrochemical sensing

Science.gov (United States)

Li, Kai; Wei, Hong; Liu, Wenguang; Meng, Hong; Zhang, Peixin; Yan, Chaoyi

2018-05-01

Developments of innovative strategies for the fabrication of stretchable sensors are of crucial importance for their applications in wearable electronic systems. In this work, we report the successful fabrication of stretchable capacitive sensors using a novel 3D printing method for highly sensitive tactile and electrochemical sensing applications. Unlike conventional lithographic or templated methods, the programmable 3D printing technique can fabricate complex device structures in a cost-effective and facile manner. We designed and fabricated stretchable capacitive sensors with interdigital and double-vortex designs and demonstrated their successful applications as tactile and electrochemical sensors. Especially, our stretchable sensors exhibited a detection limit as low as 1 × 10-6 M for NaCl aqueous solution, which could have significant potential applications when integrated in electronics skins.

In-Line Capacitance Sensor for Real-Time Water Absorption Measurements

Science.gov (United States)

Nurge, Mark A.; Perusich, Stephen A.

2010-01-01

A capacitance/dielectric sensor was designed, constructed, and used to measure in real time the in-situ water concentration in a desiccant water bed. Measurements were carried out with two experimental setups: (1) passing nitrogen through a humidity generator and allowing the gas stream to become saturated at a measured temperature and pressure, and (2) injecting water via a syringe pump into a nitrogen stream. Both water vapor generating devices were attached to a downstream vertically-mounted water capture bed filled with 19.5 g of Moisture Gone desiccant. The sensor consisted of two electrodes: (1) a 1/8" dia stainless steel rod placed in the middle of the bed and (2) the outer shell of the stainless steel bed concentric with the rod. All phases of the water capture process (background, heating, absorption, desorption, and cooling) were monitored with capacitance. The measured capacitance was found to vary linearly with the water content in the bed at frequencies above 100 kHz indicating dipolar motion dominated the signal; below this frequency, ionic motion caused nonlinearities in the water concentration/capacitance relationship. The desiccant exhibited a dielectric relaxation whose activation energy was lowered upon addition of water indicating either a less hindered rotational motion or crystal reorientation.

Amorphous carbon nanofibres inducing high specific capacitance of deposited hydrous ruthenium oxide

International Nuclear Information System (INIS)

Barranco, V.; Pico, F.; Ibanez, J.; Lillo-Rodenas, M.A.; Linares-Solano, A.; Kimura, M.; Oya, A.; Rojas, R.M.; Amarilla, J.M.; Rojo, J.M.

2009-01-01

Composites consisting of ruthenium oxide particles deposited on amorphous carbon nanofibres are prepared by a repetitive impregnation procedure. The choice of amorphous carbon nanofibres as support of amorphous ruthenium oxide leads to composites in which the deposited oxide consists of aggregates of extremely small primary particles (1-1.5 nm-size) and showing high porosity (specific surface area of 450 m 2 g -1 ). This special deposition of the oxide seems to favour: (i) high oxide capacitance (1000 Fg -1 ) at high oxide loadings (up to 20 wt%) and (ii) high capacitance retention (ca. 80% from the initial oxide capacitance) at high current densities (200 mA cm -2 ). Amorphous carbon nanofibres are suitable supports for amorphous ruthenium oxide and perhaps for other amorphous oxides acting as active electrode materials.

MOFs for the Sensitive Detection of Ammonia: Deployment of fcu-MOF Thin-Films as Effective Chemical Capacitive Sensors.

KAUST Repository

Assen, Ayalew Hussen Assen

2017-08-15

This work reports on the fabrication and deployment of a select metal-organic framework (MOF) thin film as an advanced chemical capacitive sensor for the sensing/detection of ammonia (NH3) at room temperature. Namely, the MOF thin film sensing layer consists of a rare-earth (RE) MOF (RE-fcu-MOF) deposited on a capacitive interdigitated electrode (IDE). Purposely, the chemically stable naphthalene-based RE-fcu-MOF (NDC-Y-fcu-MOF) was elected and prepared/arranged as a thin film on a pre-functionalized capacitive IDE via the solvothermal growth method. Unlike earlier realizations, the fabricated MOF-based sensor showed a notable detection sensitivity for NH3 at concentrations down to 1 ppm, with a detection limit appraised to be around 100 ppb (at room temperature) even in the presence of humidity and/or CO2. Distinctly, the NDC-Y-fcu-MOF based sensor exhibited the required stability to NH3, in contract to other reported MOFs, and a remarkable detection selectivity towards NH3 vs. CH4, NO2, H2 and C7H8. The NDC-Y-fcu-MOF based sensor exhibited excellent performance for sensing ammonia for simulated breathing system in the presence of the mixture of carbon dioxide and/or humidity (water vapor), with no major alteration in the detection signal.

Touch-mode capacitive pressure sensor with graphene-polymer heterostructure membrane

Science.gov (United States)

Berger, Christian; Phillips, Rory; Pasternak, Iwona; Sobieski, Jan; Strupinski, Wlodek; Vijayaraghavan, Aravind

2018-01-01

We describe the fabrication and characterisation of a touch-mode capacitive pressure sensor (TMCPS) with a robust design that comprises a graphene-polymer heterostructure film, laminated onto the silicon dioxide surface of a silicon wafer, incorporating a SU-8 spacer grid structure. The spacer grid structure allows the flexible graphene-polymer film to be partially suspended above the substrate, such that a pressure on the membrane results in a reproducible deflection, even after exposing the membrane to pressures over 10 times the operating range. Sensors show reproducible pressure transduction in water submersion at varying depths under static and dynamic loading. The measured capacitance change in response to pressure is in good agreement with an analytical model of clamped plates in touch mode. The device shows a pressure sensitivity of 27.1 +/- 0.5 fF Pa-1 over a pressure range of 0.5 kPa-8.5 kPa. In addition, we demonstrate the operation of this device as a force-touch sensor in air.

Modeling of Potential Distribution of Electrical Capacitance Tomography Sensor for Multiphase Flow Image

Directory of Open Access Journals (Sweden)

S. Sathiyamoorthy

2007-09-01

Full Text Available Electrical Capacitance Tomography (ECT was used to develop image of various multi phase flow of gas-liquid-solid in a closed pipe. The principal difficulties to obtained real time image from ECT sensor are permittivity distribution across the plate and capacitance is nonlinear; the electric field is distorted by the material present and is also sensitive to measurement errors and noise. This work present a detailed description is given on method employed for image reconstruction from the capacitance measurements. The discretization and iterative algorithm is developed for improving the predictions with minimum error. The author analyzed eight electrodes square sensor ECT system with two-phase water-gas and solid-gas.

Characterisation of capacitively coupled HV/HR-CMOS sensor chips for the CLIC vertex detector

Science.gov (United States)

Kremastiotis, I.

2017-12-01

The capacitive coupling between an active sensor and a readout ASIC has been considered in the framework of the CLIC vertex detector study. The CLICpix Capacitively Coupled Pixel Detector (C3PD) is a High-Voltage CMOS sensor chip produced in a commercial 180 nm HV-CMOS process for this purpose. The sensor was designed to be connected to the CLICpix2 readout chip. It therefore matches the dimensions of the readout chip, featuring a matrix of 128×128 square pixels with 25μm pitch. The sensor chip has been produced with the standard value for the substrate resistivity (~20 Ωcm) and it has been characterised in standalone testing mode, before receiving and testing capacitively coupled assemblies. The standalone measurement results show a rise time of ~20 ns for a power consumption of 5μW/pixel. Production of the C3PD HV-CMOS sensor chip with higher substrate resistivity wafers (~20, 80, 200 and 1000 Ωcm) is foreseen. The expected benefits of the higher substrate resistivity will be studied using future assemblies with the readout chip.

Characterisation of capacitively coupled HV/HR-CMOS sensor chips for the CLIC vertex detector

CERN Document Server

AUTHOR|(SzGeCERN)756402

2017-01-01

The capacitive coupling between an active sensor and a readout ASIC has been considered in the framework of the CLIC vertex detector study. The CLICpix Capacitively Coupled Pixel Detector (C3PD) is a High-Voltage CMOS sensor chip produced in a commercial 180 nm HV-CMOS process for this purpose. The sensor was designed to be connected to the CLICpix2 readout chip. It therefore matches the dimensions of the readout chip, featuring a matrix of 128 × 128 square pixels with 25 μm pitch. The sensor chip has been produced with the standard value for the substrate resistivity (∼ 20 Ωcm) and it has been characterised in standalone testing mode, before receiving and testing capacitively coupled assemblies. The standalone measurement results show a rise time of ∼ 20 ns for a power consumption of 5 μW/pixel. Production of the C3PD HV-CMOS sensor chip with higher substrate resistivity wafers (∼ 20, 80, 200 and 1000 Ωcm) is foreseen. The expected benefits of the higher substrate resistivity will be studied using...

Density Functional Theory Calculations of the Quantum Capacitance of Graphene Oxide as a Supercapacitor Electrode.

Science.gov (United States)

Song, Ce; Wang, Jinyan; Meng, Zhaoliang; Hu, Fangyuan; Jian, Xigao

2018-03-31

Graphene oxide has become an attractive electrode-material candidate for supercapacitors thanks to its higher specific capacitance compared to graphene. The quantum capacitance makes relative contributions to the specific capacitance, which is considered as the major limitation of graphene electrodes, while the quantum capacitance of graphene oxide is rarely concerned. This study explores the quantum capacitance of graphene oxide, which bears epoxy and hydroxyl groups on its basal plane, by employing density functional theory (DFT) calculations. The results demonstrate that the total density of states near the Fermi level is significantly enhanced by introducing oxygen-containing groups, which is beneficial for the improvement of the quantum capacitance. Moreover, the quantum capacitances of the graphene oxide with different concentrations of these two oxygen-containing groups are compared, revealing that more epoxy and hydroxyl groups result in a higher quantum capacitance. Notably, the hydroxyl concentration has a considerable effect on the capacitive behavior. © 2018 Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim.

Perfume Fragrance Discrimination Using Resistance And Capacitance Responses Of Polymer Sensors

Science.gov (United States)

Lima, John Paul Hempel; Vandendriessche, Thomas; Fonseca, Fernando J.; Lammertyn, Jeroen; Nicolai, Bart M.; de Andrade, Adnei Melges

2009-05-01

This work shows a comparison between electrical resistance and capacitance responses of ethanol and five different fragrances using an electronic nose based on conducting polymers. Gas chromatography—mass spectrometry (GC-MS) measurements were performed to evaluate the main differences between the analytes. It is shown that although the fragrances are quite similar in their compositions the sensors are able to discriminate them through PCA (Principal Component Analysis) and ANNs (Artificial Neural Network) analysis.

Nanocellulose coupled flexible polypyrrole@graphene oxide composite paper electrodes with high volumetric capacitance

Science.gov (United States)

Wang, Zhaohui; Tammela, Petter; Strømme, Maria; Nyholm, Leif

2015-02-01

A robust and compact freestanding conducting polymer-based electrode material based on nanocellulose coupled polypyrrole@graphene oxide paper is straightforwardly prepared via in situ polymerization for use in high-performance paper-based charge storage devices, exhibiting stable cycling over 16 000 cycles at 5 A g-1 as well as the largest specific volumetric capacitance (198 F cm-3) so far reported for flexible polymer-based electrodes.A robust and compact freestanding conducting polymer-based electrode material based on nanocellulose coupled polypyrrole@graphene oxide paper is straightforwardly prepared via in situ polymerization for use in high-performance paper-based charge storage devices, exhibiting stable cycling over 16 000 cycles at 5 A g-1 as well as the largest specific volumetric capacitance (198 F cm-3) so far reported for flexible polymer-based electrodes. Electronic supplementary information (ESI) available. See DOI: 10.1039/c4nr07251k

Modelling and design of a capacitive touch sensor for urinary tract infection detection at the point-of-care.

Science.gov (United States)

Barbosa, Cátia; Dong, Tao

2014-01-01

Due to great use of touchscreens in mobile telephones and other electronic devices, there has been great evolution in this technology. Its wide applicability makes the touch sensor technology suitable for detection of specific components in urine, responsible for urinary tract infection (UTI). Integration of a touch sensor in a disposable probe tip to be used in UTI detection represents a powerful tool to develop new point-of-care testing (POCT) devices. The simplified structure of an electrodes array touch screen was simulated using the software COMSOL Multiphysics to prove that capacitive based touch screens can be used for detection of UTI. Besides we assumed presence of E.coli, one of the major causes of UTI urine. Results show that global capacitance increases if an E.coli sphere is present near the active electrodes, remaining approximately constant when further apart electrodes are excited. The output simulated voltage varies according to the capacitance value, decreasing when the capacitance is increased.

cLite – A Capacitive Signal Conditioning IC

Directory of Open Access Journals (Sweden)

Krauss Gudrun

2009-12-01

Full Text Available The ZMD31210 cLite™ – a new member of the ZMDI’s Lite™ family of low-cost sensor signal conditioner (SSC integrated circuits – is described in this paper. The cLite™ is the first conditioner for capacitive sensors. Supporting sensor capacitances from 2 pF up to 260 pF, the new sensor signal conditioner covers a wide range of applications. An important aspect of conditioning a capacitance sensor input signal is the adaptation of the capacitive-to-digital converter (CDC input range to the sensor signal span and offset values in order to maximize accuracy. All typical features of the Lite™ family including the digital calibration math based on EEPROM-stored coefficients and a variety of outputs (I2C™, SPI, PDM, and programmable alarms are integrated in the cLite™ as well. Additional features including a sleep mode and low supply voltage range (down to 2.3 V support the low power concept. The paper focuses in particular on the capacitance sensor adaptation and high precision sensor conditioning.

Review of Recent Inkjet-Printed Capacitive Tactile Sensors

Directory of Open Access Journals (Sweden)

Ahmed Salim

2017-11-01

Full Text Available Inkjet printing is an advanced printing technology that has been used to develop conducting layers, interconnects and other features on a variety of substrates. It is an additive manufacturing process that offers cost-effective, lightweight designs and simplifies the fabrication process with little effort. There is hardly sufficient research on tactile sensors and inkjet printing. Advancements in materials science and inkjet printing greatly facilitate the realization of sophisticated tactile sensors. Starting from the concept of capacitive sensing, a brief comparison of printing techniques, the essential requirements of inkjet-printing and the attractive features of state-of-the art inkjet-printed tactile sensors developed on diverse substrates (paper, polymer, glass and textile are presented in this comprehensive review. Recent trends in inkjet-printed wearable/flexible and foldable tactile sensors are evaluated, paving the way for future research.

Simulated Effects of Soil Temperature and Salinity on Capacitance Sensor Measurements

Directory of Open Access Journals (Sweden)

Timothy R. Green

2007-04-01

Full Text Available Dielectric measurement techniques are used widely for estimation of water contentin environmental media. However, factors such as temperature and salinity affecting thereadings require further quantitative investigation and explanation. Theoretical sensitivities ofcapacitance sensors to liquid salinity and temperature of porous media were derived andcomputed using a revised electrical circuit analogue model in conjunction with a dielectricmixing model and a finite element model of Maxwell’s equation to compute electrical fielddistributions. The mixing model estimates the bulk effective complex permittivities of solid-water-air media. The real part of the permittivity values were used in electric field simulations,from which different components of capacitance were calculated via numerical integration forinput to the electrical circuit analogue. Circuit resistances representing the dielectric losses werecalculated from the complex permittivity of the bulk soil and from the modeled fields. Resonantfrequencies from the circuit analogue were used to update frequency-dependent variables in aniterative manner. Simulated resonant frequencies of the capacitance sensor display sensitivitiesto both temperature and salinity. The gradients in normalized frequency with temperatureranged from negative to positive values as salinity increased from 0 to 10 g L-1. The modeldevelopment and analyses improved our understanding of processes affecting the temperatureand salinity sensitivities of capacitance sensors in general. This study provides a foundation forfurther work on inference of soil water content under field conditions.

A simple capacitance sensor for void fraction measurement in gas-liquid two-phase flow

International Nuclear Information System (INIS)

Silva, Luiz C.R.P.; Faccini, José L.H.; Farias, Marcos S.; Su, Jian

2017-01-01

In this work we present a simple and inexpensive capacitance sensor for time averaging void fraction measurement of gas-liquid two-phase flow, which was developed at Experimental Thermal hydraulics Laboratory in the Nuclear Engineering Institute, IEN/CNEN. The sensor is a non-invasive device causing no flow disturbances. It is formed by two parallel plates and four electronic circuits: a signal input circuit, an amplification circuit, a frequency generator, and a power supply circuit. The frequency generator applies a sinusoidal signal with appropriate frequency into the signal input circuit which converts the capacitance variation value (or void fraction) of the two-phase flow into a voltage signal that goes to the amplifier stage; the output signal of the amplifier stage will be an input to an analogic/digital converter, installed inside of a computer, and it will provide interpretation of the signal behavior. The capacitance sensor was calibrated by using a horizontal acrylic tube filled with a known volume of water. (author)

A simple capacitance sensor for void fraction measurement in gas-liquid two-phase flow

Energy Technology Data Exchange (ETDEWEB)

Silva, Luiz C.R.P.; Faccini, José L.H.; Farias, Marcos S., E-mail: reina@ien.gov.br [Instituto de Engenharia Nuclear (IEN/CNEN-RJ), Rio de Janeiro, RJ (Brazil); Su, Jian, E-mail: sujian@con.ufrj.br [Coordenacao de Pos-Graduacao e Pesquisa de Engenharia (COPPE/UFRJ), Rio de Janeiro, RJ (Brazil). Instituto de Engenharia Nuclear

2017-07-01

In this work we present a simple and inexpensive capacitance sensor for time averaging void fraction measurement of gas-liquid two-phase flow, which was developed at Experimental Thermal hydraulics Laboratory in the Nuclear Engineering Institute, IEN/CNEN. The sensor is a non-invasive device causing no flow disturbances. It is formed by two parallel plates and four electronic circuits: a signal input circuit, an amplification circuit, a frequency generator, and a power supply circuit. The frequency generator applies a sinusoidal signal with appropriate frequency into the signal input circuit which converts the capacitance variation value (or void fraction) of the two-phase flow into a voltage signal that goes to the amplifier stage; the output signal of the amplifier stage will be an input to an analogic/digital converter, installed inside of a computer, and it will provide interpretation of the signal behavior. The capacitance sensor was calibrated by using a horizontal acrylic tube filled with a known volume of water. (author)

A new recontruction algorithm for use with capacitance-based tomography

Directory of Open Access Journals (Sweden)

Ø. Isaksen

1994-01-01

Full Text Available A new reconstruction algorithm for use with capacitance-based process tomography is proposed. A numerical simulator, capable of calculating the capacitances for a particular sensor configuration and flow regime is used together with a parameter representation of the dielectric distribution and an optimization algorithm. The algorithm calculates these parameters and hence the dielectric distribution, by minimizing a function defined as a weighted sum of square differences between the measured and estimated capacitances. The method is tested by using both synthetic and experimental data, and the results are compared with results from the commonly used Linear Back Projection (LBP algorithm. The method is capable of obtaining the correct parameter values for all the flow regimes tested, and does provide a better estimate than the LBP method. The method proves to be very promising, and is a step towards quantitative capacitance tomography.

Design of a Capacitive Flexible Weighing Sensor for Vehicle WIM System

Directory of Open Access Journals (Sweden)

Qing Li

2007-08-01

Full Text Available With the development of the Highway Transportation and Business Trade, vehicle weigh-in-motion (WIM technology has become a key technology and trend of measuring traffic loads. In this paper, a novel capacitive flexible weighing sensor which is light weight, smaller volume and easy to carry was applied in the vehicle WIM system. The dynamic behavior of the sensor is modeled using the Maxwell-Kelvin model because the materials of the sensor are rubbers which belong to viscoelasticity. A signal processing method based on the model is presented to overcome effects of rubber mechanical properties on the dynamic weight signal. The results showed that the measurement error is less than ���±10%. All the theoretic analysis and numerical results demonstrated that appliance of this system to weigh in motion is feasible and convenient for traffic inspection.

Reliable before-fabrication forecasting of normal and touch mode MEMS capacitive pressure sensor: modeling and simulation

Science.gov (United States)

Jindal, Sumit Kumar; Mahajan, Ankush; Raghuwanshi, Sanjeev Kumar

2017-10-01

An analytical model and numerical simulation for the performance of MEMS capacitive pressure sensors in both normal and touch modes is required for expected behavior of the sensor prior to their fabrication. Obtaining such information should be based on a complete analysis of performance parameters such as deflection of diaphragm, change of capacitance when the diaphragm deflects, and sensitivity of the sensor. In the literature, limited work has been carried out on the above-stated issue; moreover, due to approximation factors of polynomials, a tolerance error cannot be overseen. Reliable before-fabrication forecasting requires exact mathematical calculation of the parameters involved. A second-order polynomial equation is calculated mathematically for key performance parameters of both modes. This eliminates the approximation factor, and an exact result can be studied, maintaining high accuracy. The elimination of approximation factors and an approach of exact results are based on a new design parameter (δ) that we propose. The design parameter gives an initial hint to the designers on how the sensor will behave once it is fabricated. The complete work is aided by extensive mathematical detailing of all the parameters involved. Next, we verified our claims using MATLAB® simulation. Since MATLAB® effectively provides the simulation theory for the design approach, more complicated finite element method is not used.

Assessment of an ultrasonic sensor and a capacitance probe for measurement of two-phase mixture level

International Nuclear Information System (INIS)

Kim, Chang Hyun; Lee, Dong Won; No, Hee Cheon

2004-01-01

We performed a comparison of two-phase mixture levels measured by an ultrasonic sensor and a two-wire type capacitance probe with visual data under the same experimental conditions. A series of experiments are performed with various combinations of airflow and initial water level using a test vessel with a height of 2m and an inner diameter of 0.3m. The ultrasonic sensor measured the two-phase mixture level with a maximum error of 1.77% with respect to the visual data. The capacitance probe severely under-predicted the level data in the high void fraction region. The cause of the error was identified as the change of the dielectric constant as the void fraction changes when the probe is applied to the measurement of the two-phase mixture levels. A correction method for the capacitance probe is proposed by correcting the change of the dielectric constant of the two-phase mixture. The correction method for the capacitance probe produces a r.m.s. error of 5.4%. The present experimental data are compared with the existing pool void fraction correlations based on drift-flux model. The Kataoka-Ishii correlation has the best agreement with the present experimental data with an r.m.s error of 2.5%

Highly Sensitive Sensors Based on Metal-Oxide Nanocolumns for Fire Detection

Directory of Open Access Journals (Sweden)

Kwangjae Lee

2017-02-01

Full Text Available A fire detector is the most important component in a fire alarm system. Herein, we present the feasibility of a highly sensitive and rapid response gas sensor based on metal oxides as a high performance fire detector. The glancing angle deposition (GLAD technique is used to make the highly porous structure such as nanocolumns (NCs of various metal oxides for enhancing the gas-sensing performance. To measure the fire detection, the interface circuitry for our sensors (NiO, SnO2, WO3 and In2O3 NCs is designed. When all the sensors with various metal-oxide NCs are exposed to fire environment, they entirely react with the target gases emitted from Poly(vinyl chlorides (PVC decomposed at high temperature. Before the emission of smoke from the PVC (a hot-plate temperature of 200 °C, the resistances of the metal-oxide NCs are abruptly changed and SnO2 NCs show the highest response of 2.1. However, a commercial smoke detector did not inform any warning. Interestingly, although the NiO NCs are a p-type semiconductor, they show the highest response of 577.1 after the emission of smoke from the PVC (a hot-plate temperature of 350 °C. The response time of SnO2 NCs is much faster than that of a commercial smoke detector at the hot-plate temperature of 350 °C. In addition, we investigated the selectivity of our sensors by analyzing the responses of all sensors. Our results show the high potential of a gas sensor based on metal-oxide NCs for early fire detection.

Noncontact on-machine measurement system based on capacitive displacement sensors for single-point diamond turning

Science.gov (United States)

Li, Xingchang; Zhang, Zhiyu; Hu, Haifei; Li, Yingjie; Xiong, Ling; Zhang, Xuejun; Yan, Jiwang

2018-04-01

On-machine measurements can improve the form accuracy of optical surfaces in single-point diamond turning applications; however, commercially available linear variable differential transformer sensors are inaccurate and can potentially scratch the surface. We present an on-machine measurement system based on capacitive displacement sensors for high-precision optical surfaces. In the proposed system, a position-trigger method of measurement was developed to ensure strict correspondence between the measurement points and the measurement data with no intervening time-delay. In addition, a double-sensor measurement was proposed to reduce the electric signal noise during spindle rotation. Using the proposed system, the repeatability of 80-nm peak-to-valley (PV) and 8-nm root-mean-square (RMS) was achieved through analyzing four successive measurement results. The accuracy of 109-nm PV and 14-nm RMS was obtained by comparing with the interferometer measurement result. An aluminum spherical mirror with a diameter of 300 mm was fabricated, and the resulting measured form error after one compensation cut was decreased to 254 nm in PV and 52 nm in RMS. These results confirm that the measurements of the surface form errors were successfully used to modify the cutting tool path during the compensation cut, thereby ensuring that the diamond turning process was more deterministic. In addition, the results show that the noise level was significantly reduced with the reference sensor even under a high rotational speed.

Development of 3D carbon nanotube interdigitated finger electrodes on polymer substrate for flexible capacitive sensor application

International Nuclear Information System (INIS)

Hu, Chih-Fan; Wang, Jhih-Yu; Fang, Weileun; Liu, Yu-Chia; Tsai, Ming-Han

2013-01-01

This study reports a novel approach to the implementation of 3D carbon nanotube (CNT) interdigitated finger electrodes on flexible polymer, and the detection of strain, bending curvature, tactile force and proximity distance are demonstrated. The merits of the presented CNT-based flexible sensor are as follows: (1) the silicon substrate is patterned to enable the formation of 3D vertically aligned CNTs on the substrate surface; (2) polymer molding on the silicon substrate with 3D CNTs is further employed to transfer the 3D CNTs to the flexible polymer substrate; (3) the CNT–polymer composite (∼70 μm in height) is employed to form interdigitated finger electrodes to increase the sensing area and initial capacitance; (4) other structures such as electrical routings, resistors and mechanical supporters are also available using the CNT–polymer composite. The preliminary fabrication results demonstrate a flexible capacitive sensor with 50 μm high CNT interdigitated electrodes on a poly-dimethylsiloxane substrate. The tests show that the typical capacitance change is several dozens of fF and the gauge factor is in the range of 3.44–4.88 for strain and bending curvature measurement; the sensitivity of the tactile sensor is 1.11% N −1 ; a proximity distance near 2 mm away from the sensor can be detected. (paper)

A Micromachined Capacitive Pressure Sensor Using a Cavity-Less Structure with Bulk-Metal/Elastomer Layers and Its Wireless Telemetry Application

Directory of Open Access Journals (Sweden)

Yogesh B. Gianchandani

2008-04-01

Full Text Available This paper reports a micromachined capacitive pressure sensor intended for applications that require mechanical robustness. The device is constructed with two micromachined metal plates and an intermediate polymer layer that is soft enough to deform in a target pressure range. The plates are formed of micromachined stainless steel fabricated by batch-compatible micro-electro-discharge machining. A polyurethane roomtemperature- vulcanizing liquid rubber of 38-μm thickness is used as the deformable material. This structure eliminates both the vacuum cavity and the associated lead transfer challenges common to micromachined capacitive pressure sensors. For frequency-based interrogation of the capacitance, passive inductor-capacitor tanks are fabricated by combining the capacitive sensor with an inductive coil. The coil has 40 turns of a 127-μmdiameter copper wire. Wireless sensing is demonstrated in liquid by monitoring the variation in the resonant frequency of the tank via an external coil that is magnetically coupled with the tank. The sensitivity at room temperature is measured to be 23-33 ppm/KPa over a dynamic range of 340 KPa, which is shown to match a theoretical estimation. Temperature dependence of the tank is experimentally evaluated.

A 35fJ/Step differential successive approximation capacitive sensor readout circuit with quasi-dynamic operation

KAUST Repository

Omran, Hesham

2016-10-06

We propose a successive-approximation capacitive sensor readout circuit that achieves 35fJ/Step energy efficiency FoM, which represents 4× improvement over the state-of-the-art. A fully differential architecture is employed to provide robustness against common mode noise and errors. An inverter-based amplifier with near-threshold biasing provides robust, fast, and energy-efficient operation. Quasi-dynamic operation is used to maintain the energy efficiency for a scalable sample rate. A hybrid coarse-fine capacitive DAC achieves 11.7bit effective resolution in a compact area. © 2016 IEEE.

A new cylindrical capacitance sensor for measurement of water cut in a low-production horizontal well

International Nuclear Information System (INIS)

Liu Xingbin; Hu Jinhai; Xie Zhonglin; Li Yiwei; Xu Wenfeng; Xu Lijun

2009-01-01

In a horizontal well with low flow rate, oil-water two-phase flow is stratified due to gravity. For measuring water cut accurately in a low-production horizontal well, a novel cylindrical capacitance sensor is proposed in this paper. The structure of the sensor is cylindrical and hollow with multi-layer structure which is consisted of inside insulation layer, electrode layer, outside insulation layer and metal casing from inside to outside. And the measurement principle is analyzed in this paper. The mathematical model is established, which shows that theoretically, there is a good relationship between the sensor response and water holdup. The response curve is monotone and the sensor has a good resolution and a high sensitivity in the whole range of water holdup. The electric field of cylindrical capacitance sensor was simulated respectively by using ANSYS software when the sensor is filled with pure water, pure oil and oil-water mixture. The results of the simulation are consistent with the mathematical model. Static experiments with the sensor filled with oil-water mixture were conducted finally. The results have verified the theoretical analysis and show that the proposed sensor is a viable solution to measuring water cut in a low-production horizontal well. Cylindrical capacitance sensor provides a good reference for the water cut in low-production horizontal well and has a good application prospect.

Improved electronic interfaces for AT-cut quartz crystal microbalance sensors under variable damping and parallel capacitance conditions.

Science.gov (United States)

Arnau, A; García, J V; Jimenez, Y; Ferrari, V; Ferrari, M

2008-07-01

A new configuration of automatic capacitance compensation (ACC) technique based on an oscillatorlike working interface, which permits the tracking of the series resonant frequency and the monitoring of the motional resistance and the parallel capacitance of a thickness-shear mode quartz crystal microbalance sensor, is introduced. The new configuration permits an easier calibration of the system which, in principle, improves the accuracy. Experimental results are reported with 9 and 10 MHz crystals in liquids with different parallel capacitances which demonstrate the effectiveness of the capacitance compensation. Some frequency deviations from the exact series resonant frequency, measured by an impedance analyzer, are explained by the specific nonideal behavior of the circuit components. A tentative approach is proposed to solve this problem that is also common to previous ACC systems.

Improved electronic interfaces for AT-cut quartz crystal microbalance sensors under variable damping and parallel capacitance conditions

International Nuclear Information System (INIS)

Arnau, A.; Garcia, J. V.; Jimenez, Y.; Ferrari, V.; Ferrari, M.

2008-01-01

A new configuration of automatic capacitance compensation (ACC) technique based on an oscillatorlike working interface, which permits the tracking of the series resonant frequency and the monitoring of the motional resistance and the parallel capacitance of a thickness-shear mode quartz crystal microbalance sensor, is introduced. The new configuration permits an easier calibration of the system which, in principle, improves the accuracy. Experimental results are reported with 9 and 10 MHz crystals in liquids with different parallel capacitances which demonstrate the effectiveness of the capacitance compensation. Some frequency deviations from the exact series resonant frequency, measured by an impedance analyzer, are explained by the specific nonideal behavior of the circuit components. A tentative approach is proposed to solve this problem that is also common to previous ACC systems

0.5 V and 0.43 pJ/bit Capacitive Sensor Interface for Passive Wireless Sensor Systems.

Science.gov (United States)

Beriain, Andoni; Gutierrez, Iñigo; Solar, Hector; Berenguer, Roc

2015-08-28

This paper presents an ultra low-power and low-voltage pulse-width modulation based ratiometric capacitive sensor interface. The interface was designed and fabricated in a standard 90 nm CMOS 1P9M technology. The measurements show an effective resolution of 10 bits using 0.5 V of supply voltage. The active occupied area is only 0.0045 mm2 and the Figure of Merit (FOM), which takes into account the energy required per conversion bit, is 0.43 pJ/bit. Furthermore, the results show low sensitivity to PVT variations due to the proposed ratiometric architecture. In addition, the sensor interface was connected to a commercial pressure transducer and the measurements of the resulting complete pressure sensor show a FOM of 0.226 pJ/bit with an effective linear resolution of 7.64 bits. The results validate the use of the proposed interface as part of a pressure sensor, and its low-power and low-voltage characteristics make it suitable for wireless sensor networks and low power consumer electronics.

A Tactile Sensor Network System Using a Multiple Sensor Platform with a Dedicated CMOS-LSI for Robot Applications.

Science.gov (United States)

Shao, Chenzhong; Tanaka, Shuji; Nakayama, Takahiro; Hata, Yoshiyuki; Bartley, Travis; Nonomura, Yutaka; Muroyama, Masanori

2017-08-28

Robot tactile sensation can enhance human-robot communication in terms of safety, reliability and accuracy. The final goal of our project is to widely cover a robot body with a large number of tactile sensors, which has significant advantages such as accurate object recognition, high sensitivity and high redundancy. In this study, we developed a multi-sensor system with dedicated Complementary Metal-Oxide-Semiconductor (CMOS) Large-Scale Integration (LSI) circuit chips (referred to as "sensor platform LSI") as a framework of a serial bus-based tactile sensor network system. The sensor platform LSI supports three types of sensors: an on-chip temperature sensor, off-chip capacitive and resistive tactile sensors, and communicates with a relay node via a bus line. The multi-sensor system was first constructed on a printed circuit board to evaluate basic functions of the sensor platform LSI, such as capacitance-to-digital and resistance-to-digital conversion. Then, two kinds of external sensors, nine sensors in total, were connected to two sensor platform LSIs, and temperature, capacitive and resistive sensing data were acquired simultaneously. Moreover, we fabricated flexible printed circuit cables to demonstrate the multi-sensor system with 15 sensor platform LSIs operating simultaneously, which showed a more realistic implementation in robots. In conclusion, the multi-sensor system with up to 15 sensor platform LSIs on a bus line supporting temperature, capacitive and resistive sensing was successfully demonstrated.

Fabrication of a thin-film capacitive force sensor array for tactile feedback in robotic surgery.

Science.gov (United States)

Paydar, Omeed H; Wottawa, Christopher R; Fan, Richard E; Dutson, Erik P; Grundfest, Warren S; Culjat, Martin O; Candler, Rob N

2012-01-01

Although surgical robotic systems provide several advantages over conventional minimally invasive techniques, they are limited by a lack of tactile feedback. Recent research efforts have successfully integrated tactile feedback components onto surgical robotic systems, and have shown significant improvement to surgical control during in vitro experiments. The primary barrier to the adoption of tactile feedback in clinical use is the unavailability of suitable force sensing technologies. This paper describes the design and fabrication of a thin-film capacitive force sensor array that is intended for integration with tactile feedback systems. This capacitive force sensing technology could provide precise, high-sensitivity, real-time responses to both static and dynamic loads. Capacitive force sensors were designed to operate with optimal sensitivity and dynamic range in the range of forces typical in minimally invasive surgery (0-40 N). Initial results validate the fabrication of these capacitive force-sensing arrays. We report 16.3 pF and 146 pF for 1-mm(2) and 9-mm(2) capacitive areas, respectively, whose values are within 3% of theoretical predictions.

Transparent Fingerprint Sensor System for Large Flat Panel Display.

Science.gov (United States)

Seo, Wonkuk; Pi, Jae-Eun; Cho, Sung Haeung; Kang, Seung-Youl; Ahn, Seong-Deok; Hwang, Chi-Sun; Jeon, Ho-Sik; Kim, Jong-Uk; Lee, Myunghee

2018-01-19

In this paper, we introduce a transparent fingerprint sensing system using a thin film transistor (TFT) sensor panel, based on a self-capacitive sensing scheme. An armorphousindium gallium zinc oxide (a-IGZO) TFT sensor array and associated custom Read-Out IC (ROIC) are implemented for the system. The sensor panel has a 200 × 200 pixel array and each pixel size is as small as 50 μm × 50 μm. The ROIC uses only eight analog front-end (AFE) amplifier stages along with a successive approximation analog-to-digital converter (SAR ADC). To get the fingerprint image data from the sensor array, the ROIC senses a capacitance, which is formed by a cover glass material between a human finger and an electrode of each pixel of the sensor array. Three methods are reviewed for estimating the self-capacitance. The measurement result demonstrates that the transparent fingerprint sensor system has an ability to differentiate a human finger's ridges and valleys through the fingerprint sensor array.

Microcontroller based instrumentation for heater control circuit of tin oxide based hydrogen sensor

International Nuclear Information System (INIS)

Premalatha, S.; Krithika, P.; Gunasekaran, G.; Ramakrishnan, R.; Ramanarayanan, R.R.; Prabhu, E.; Jayaraman, V.; Parthasarathy, R.

2015-01-01

A thin film sensor based on tin oxide developed in IGCAR is used to monitor very low levels of hydrogen (concentration ranging from 2 ppm to 80 ppm). The heater and the sensor patterns are integrated on a miniature alumina substrate and necessary electrical leads are taken out. For proper functioning of the sensor, the heater has to be maintained at a constant temperature of 350°C. The sensor output (voltage signal) varies with H 2 concentration. In fast breeder reactors, liquid sodium is used as coolant. The sensor is used to detect water/steam leak in secondary sodium circuit. During the start up of the reactor, steam leak into sodium circuit generates hydrogen gas as a product that doesn't dissolve in sodium, but escapes to the surge tank containing argon i.e. in cover gas plenum of sodium circuit. On-line monitoring of hydrogen in cover gas is done to detect an event of water/steam leakage. The focus of this project is on the instrumentation pertaining to the temperature control for the sensor heater. The tin oxide based hydrogen sensor is embedded in a substrate which consists of a platinum heater, essentially a resistor. There is no provision of embedding a temperature sensor on the heater surface due to the physical constraints, without which maintaining a constant heater temperature is a complex task

Modeling and design of a capacitive microwave power sensor for X-band applications based on GaAs technology

Science.gov (United States)

Cui, Yan; Liao, Xiaoping

2012-05-01

In the work, modeling and design of a capacitive microwave power sensor employing the MEMS plate with clamped-clamped and free-free edges are presented. A novel analytical model of the sensor is established in detail. Through the function of mode shapes presented, the natural frequency can be solved by the Rayleigh-Ritz method. And based on the generalized coordinate introduced, the displacement of the plate with the irradiation of microwave power can be solved. Furthermore, the sensitivity for the power is also derived. Then the detailed consideration of the design and simulation of the microwave characteristic of the sensor are also presented. The linearly graded ground planar in the coplanar waveguide is employed to avoid step discontinuity. The fabrication process is compatible with GaAs MMIC technology completely, also described in detail. The measurement of the proposed sensor indicates a sensitivity of 7.2 fF W-1 and superior return and insertion losses (S11 and S21), less than -22.16 dB and -0.25 dB, respectively, up to 12 GHz, suggesting that it can be available for microwave power detecting in the X-band frequency range.

Modeling and design of a capacitive microwave power sensor for X-band applications based on GaAs technology

International Nuclear Information System (INIS)

Cui, Yan; Liao, Xiaoping

2012-01-01

In the work, modeling and design of a capacitive microwave power sensor employing the MEMS plate with clamped–clamped and free–free edges are presented. A novel analytical model of the sensor is established in detail. Through the function of mode shapes presented, the natural frequency can be solved by the Rayleigh–Ritz method. And based on the generalized coordinate introduced, the displacement of the plate with the irradiation of microwave power can be solved. Furthermore, the sensitivity for the power is also derived. Then the detailed consideration of the design and simulation of the microwave characteristic of the sensor are also presented. The linearly graded ground planar in the coplanar waveguide is employed to avoid step discontinuity. The fabrication process is compatible with GaAs MMIC technology completely, also described in detail. The measurement of the proposed sensor indicates a sensitivity of 7.2 fF W −1 and superior return and insertion losses (S 11 and S 21 ), less than −22.16 dB and −0.25 dB, respectively, up to 12 GHz, suggesting that it can be available for microwave power detecting in the X-band frequency range. (paper)

A Tactile Sensor Network System Using a Multiple Sensor Platform with a Dedicated CMOS-LSI for Robot Applications †

Science.gov (United States)

Shao, Chenzhong; Tanaka, Shuji; Nakayama, Takahiro; Hata, Yoshiyuki; Bartley, Travis; Muroyama, Masanori

2017-01-01

Robot tactile sensation can enhance human–robot communication in terms of safety, reliability and accuracy. The final goal of our project is to widely cover a robot body with a large number of tactile sensors, which has significant advantages such as accurate object recognition, high sensitivity and high redundancy. In this study, we developed a multi-sensor system with dedicated Complementary Metal-Oxide-Semiconductor (CMOS) Large-Scale Integration (LSI) circuit chips (referred to as “sensor platform LSI”) as a framework of a serial bus-based tactile sensor network system. The sensor platform LSI supports three types of sensors: an on-chip temperature sensor, off-chip capacitive and resistive tactile sensors, and communicates with a relay node via a bus line. The multi-sensor system was first constructed on a printed circuit board to evaluate basic functions of the sensor platform LSI, such as capacitance-to-digital and resistance-to-digital conversion. Then, two kinds of external sensors, nine sensors in total, were connected to two sensor platform LSIs, and temperature, capacitive and resistive sensing data were acquired simultaneously. Moreover, we fabricated flexible printed circuit cables to demonstrate the multi-sensor system with 15 sensor platform LSIs operating simultaneously, which showed a more realistic implementation in robots. In conclusion, the multi-sensor system with up to 15 sensor platform LSIs on a bus line supporting temperature, capacitive and resistive sensing was successfully demonstrated. PMID:29061954

Polymer−metal organic framework composite films as affinity layer for capacitive sensor devices

NARCIS (Netherlands)

Sachdeva, S.; Gravesteijn, Dirk J; Soccol, D.; Kapteijn, F.; Sudhölter, E.J.R.; Gascon, J.; Smet, de L.C.P.M.

2016-01-01

We report a simple method for sensor development using polymer-MOF composite films. Nanoparticles of NH2-MIL-53(Al) dispersed in a Matrimid polyimide were applied as a thin film on top of capacitive sensor devices with planar electrodes. These drop-cast films act as an affinity layer. Sensing

Polymer-metal organic framework composite films as affinity layer for capacitive sensor devices

NARCIS (Netherlands)

Sachdeva, Sumit; Soccol, Dimitri; Gravesteijn, Dirk J.; Kapteijn, Freek; Sudhölter, E.J.R.; Gascon, Jorge; Smet, de L.C.P.M.

2016-01-01

We report a simple method for sensor development using polymer-
MOF composite films. Nanoparticles of NH2-MIL-53(Al) dispersed in a Matrimid
polyimide were applied as a thin film on top of capacitive sensor devices with planar electrodes. These drop-cast films act as an affinity layer.

Transparent, Flexible, Conformal Capacitive Pressure Sensors with Nanoparticles.

Science.gov (United States)

Kim, Hyeohn; Kim, Gwangmook; Kim, Taehoon; Lee, Sangwoo; Kang, Donyoung; Hwang, Min-Soo; Chae, Youngcheol; Kang, Shinill; Lee, Hyungsuk; Park, Hong-Gyu; Shim, Wooyoung

2018-02-01

The fundamental challenge in designing transparent pressure sensors is the ideal combination of high optical transparency and high pressure sensitivity. Satisfying these competing demands is commonly achieved by a compromise between the transparency and usage of a patterned dielectric surface, which increases pressure sensitivity, but decreases transparency. Herein, a design strategy for fabricating high-transparency and high-sensitivity capacitive pressure sensors is proposed, which relies on the multiple states of nanoparticle dispersity resulting in enhanced surface roughness and light transmittance. We utilize two nanoparticle dispersion states on a surface: (i) homogeneous dispersion, where each nanoparticle (≈500 nm) with a size comparable to the visible light wavelength has low light scattering; and (ii) heterogeneous dispersion, where aggregated nanoparticles form a micrometer-sized feature, increasing pressure sensitivity. This approach is experimentally verified using a nanoparticle-dispersed polymer composite, which has high pressure sensitivity (1.0 kPa -1 ), and demonstrates excellent transparency (>95%). We demonstrate that the integration of nanoparticle-dispersed capacitor elements into an array readily yields a real-time pressure monitoring application and a fully functional touch device capable of acting as a pressure sensor-based input device, thereby opening up new avenues to establish processing techniques that are effective on the nanoscale yet applicable to macroscopic processing. © 2018 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

Graphene Oxide in Lossy Mode Resonance-Based Optical Fiber Sensors for Ethanol Detection

Directory of Open Access Journals (Sweden)

Miguel Hernaez

2017-12-01

Full Text Available The influence of graphene oxide (GO over the features of an optical fiber ethanol sensor based on lossy mode resonances (LMR has been studied in this work. Four different sensors were built with this aim, each comprising a multimode optical fiber core fragment coated with a SnO2 thin film. Layer by layer (LbL coatings made of 1, 2 and 4 bilayers of polyethyleneimine (PEI and graphene oxide were deposited onto three of these devices and their behavior as aqueous ethanol sensors was characterized and compared with the sensor without GO. The sensors with GO showed much better performance with a maximum sensitivity enhancement of 176% with respect to the sensor without GO. To our knowledge, this is the first time that GO has been used to make an optical fiber sensor based on LMR.

Graphene Oxide in Lossy Mode Resonance-Based Optical Fiber Sensors for Ethanol Detection.

Science.gov (United States)

Hernaez, Miguel; Mayes, Andrew G; Melendi-Espina, Sonia

2017-12-27

The influence of graphene oxide (GO) over the features of an optical fiber ethanol sensor based on lossy mode resonances (LMR) has been studied in this work. Four different sensors were built with this aim, each comprising a multimode optical fiber core fragment coated with a SnO₂ thin film. Layer by layer (LbL) coatings made of 1, 2 and 4 bilayers of polyethyleneimine (PEI) and graphene oxide were deposited onto three of these devices and their behavior as aqueous ethanol sensors was characterized and compared with the sensor without GO. The sensors with GO showed much better performance with a maximum sensitivity enhancement of 176% with respect to the sensor without GO. To our knowledge, this is the first time that GO has been used to make an optical fiber sensor based on LMR.

Equivalent distributed capacitance model of oxide traps on frequency dispersion of C – V curve for MOS capacitors

International Nuclear Information System (INIS)

Lu Han-Han; Xu Jing-Ping; Liu Lu; Lai Pui-To; Tang Wing-Man

2016-01-01

An equivalent distributed capacitance model is established by considering only the gate oxide-trap capacitance to explain the frequency dispersion in the C – V curve of MOS capacitors measured for a frequency range from 1 kHz to 1 MHz. The proposed model is based on the Fermi–Dirac statistics and the charging/discharging effects of the oxide traps induced by a small ac signal. The validity of the proposed model is confirmed by the good agreement between the simulated results and experimental data. Simulations indicate that the capacitance dispersion of an MOS capacitor under accumulation and near flatband is mainly caused by traps adjacent to the oxide/semiconductor interface, with negligible effects from the traps far from the interface, and the relevant distance from the interface at which the traps can still contribute to the gate capacitance is also discussed. In addition, by excluding the negligible effect of oxide-trap conductance, the model avoids the use of imaginary numbers and complex calculations, and thus is simple and intuitive. (paper)

Resonant gravimetric immunosensing based on capacitive micromachined ultrasound transducers

KAUST Repository

Viržonis, Darius

2014-04-08

High-frequency (40 MHz) and low-frequency (7 MHz) capacitive micromachined ultrasound transducers (CMUT) were fabricated and tested for use in gravimetric detection of biomolecules. The low-frequency CMUT sensors have a gold-coated surface, while the high-frequency sensors have a silicon nitride surface. Both surfaces were functionalized with bovine leukemia virus antigen gp51 acting as the antigen. On addition of an a specific antibody labeled with horseradish peroxidase (HRP), the antigen/antibody complex is formed on the surface and quantified by HRP-catalyzed oxidation of tetramethylbenzidine. It has been found that a considerably smaller quantity of immuno complex is formed on the high frequency sensor surface. In parallel, the loading of the surface of the CMUT was determined via resonance frequency and electromechanical resistance readings. Following the formation of the immuno complexes, the resonance frequencies of the low-frequency and high-frequency sensors decrease by up to 420 and 440 kHz, respectively. Finite element analysis reveals that the loading of the (gold-coated) low frequency sensors is several times larger than that on high frequency sensors. The formation of the protein film with pronounced elasticity and stress on the gold surface case is discussed. We also discuss the adoption of this method for the detection of DNA using a hybridization assay following polymerase chain reaction.

Novel Dry-Type Glucose Sensor Based on a Metal-Oxide-Semiconductor Capacitor Structure with Horseradish Peroxidase + Glucose Oxidase Catalyzing Layer

Science.gov (United States)

Lin, Jing-Jenn; Wu, You-Lin; Hsu, Po-Yen

2007-10-01

In this paper, we present a novel dry-type glucose sensor based on a metal-oxide-semiconductor capacitor (MOSC) structure using SiO2 as a gate dielectric in conjunction with a horseradish peroxidase (HRP) + glucose oxidase (GOD) catalyzing layer. The tested glucose solution was dropped directly onto the window opened on the SiO2 layer, with a coating of HRP + GOD catalyzing layer on top of the gate dielectric. From the capacitance-voltage (C-V) characteristics of the sensor, we found that the glucose solution can induce an inversion layer on the silicon surface causing a gate leakage current flowing along the SiO2 surface. The gate current changes Δ I before and after the drop of glucose solution exhibits a near-linear relationship with increasing glucose concentration. The Δ I sensitivity is about 1.76 nA cm-2 M-1, and the current is quite stable 20 min after the drop of the glucose solution is tested.

A 33fJ/Step SAR Capacitance-to-Digital Converter Using a Chain of Inverter-Based Amplifiers

KAUST Repository

Omran, Hesham

2016-11-16

A 12 - bit energy-efficient capacitive sensor interface circuit that fully relies on capacitance-domain successive approximation (SAR) technique is presented. Analysis shows that for SAR capacitance-to-digital converter (CDC) comparator offset voltage will result in parasitic-dependent conversion errors, which necessitates using an offset cancellation technique. Based on the presented analysis, a SAR CDC that uses a chain of cascode inverter-based amplifiers with near-threshold biasing is proposed to provide robust, energy-efficient, and fast operation. A hybrid coarse-fine capacitive digital-to-analog converter (CapDAC) achieves 11.7 - bit effective resolution, and provides 83% area saving compared to a conventional binary weighted implementation. The prototype fabricated in a 0.18μm CMOS technology is experimentally verified using MEMS capacitive pressure sensor. Experimental results show an energy efficiency figure-of-merit (FoM) of 33 f J/Step which outperforms the state-of-the-art. The CDC output is insensitive to analog references; thus, a very low temperature sensitivity of 2.3 ppm/°C is achieved without the need for calibration.

A 33fJ/Step SAR Capacitance-to-Digital Converter Using a Chain of Inverter-Based Amplifiers

KAUST Repository

Omran, Hesham; Alhoshany, Abdulaziz; Alahmadi, Hamzah; Salama, Khaled N.

2016-01-01

A 12 - bit energy-efficient capacitive sensor interface circuit that fully relies on capacitance-domain successive approximation (SAR) technique is presented. Analysis shows that for SAR capacitance-to-digital converter (CDC) comparator offset voltage will result in parasitic-dependent conversion errors, which necessitates using an offset cancellation technique. Based on the presented analysis, a SAR CDC that uses a chain of cascode inverter-based amplifiers with near-threshold biasing is proposed to provide robust, energy-efficient, and fast operation. A hybrid coarse-fine capacitive digital-to-analog converter (CapDAC) achieves 11.7 - bit effective resolution, and provides 83% area saving compared to a conventional binary weighted implementation. The prototype fabricated in a 0.18μm CMOS technology is experimentally verified using MEMS capacitive pressure sensor. Experimental results show an energy efficiency figure-of-merit (FoM) of 33 f J/Step which outperforms the state-of-the-art. The CDC output is insensitive to analog references; thus, a very low temperature sensitivity of 2.3 ppm/°C is achieved without the need for calibration.

Characterization of active CMOS sensors for capacitively coupled pixel detectors

Energy Technology Data Exchange (ETDEWEB)

Hirono, Toko; Gonella, Laura; Janssen, Jens; Hemperek, Tomasz; Huegging, Fabian; Krueger, Hans; Wermes, Norbert [Institute of Physics, University of Bonn (Germany); Peric, Ivan [Institut fuer Prozessdatenverarbeitung und Elektronik, Karlsruher Institut fuer Technologie, Karlsruhe (Germany)

2015-07-01

Active CMOS pixel sensor is one of the most attractive candidates for detectors of upcoming particle physics experiments. In contrast to conventional sensors of hybrid detectors, signal processing circuit can be integrated in the active CMOS sensor. The characterization and optimization of the pixel circuit are indispensable to obtain a good performance from the sensors. The prototype chips of the active CMOS sensor were fabricated in the AMS 180nm and L-Foundry 150 nm CMOS processes, respectively a high voltage and high resistivity technology. Both chips have a charge sensitive amplifier and a comparator in each pixel. The chips are designed to be glued to the FEI4 pixel readout chip. The signals from 3 pixels of the prototype chips are capacitively coupled to the FEI4 input pads. We have performed lab tests and test beams to characterize the prototypes. In this presentation, the measurement results of the active CMOS prototype sensors are shown.

Investigation of the capacitive performance of tobacco solution reduced graphene oxide

Energy Technology Data Exchange (ETDEWEB)

Jana, Milan [Surface Engineering and Tribology Division, Council of Scientific and Industrial Research – Central Mechanical Engineering Research Institute, Durgapur 713209 (India); Academy of Scientific and Innovative Research (AcSIR), Anusandhan Bhawan, 2 Rafi Marg, New Delhi 110001 (India); Saha, Sanjit; Samanta, Pranab; Murmu, Naresh Chandra [Surface Engineering and Tribology Division, Council of Scientific and Industrial Research – Central Mechanical Engineering Research Institute, Durgapur 713209 (India); Lee, Joong Hee, E-mail: jhl@jbnu.ac.kr [Advanced Materials Research Institute for BIN Fusion Technology (BK Plus Global, Program), Department of BIN Fusion Technology, Chonbuk National University, Jeonju, Jeonbuk 561-756 (Korea, Republic of); Kuila, Tapas, E-mail: tkuila@gmail.com [Surface Engineering and Tribology Division, Council of Scientific and Industrial Research – Central Mechanical Engineering Research Institute, Durgapur 713209 (India)

2015-02-01

A facile and green approach for the reduction of graphene oxide (GO) using tobacco leaves solution was reported. The benefits of this approach were the use of green and cheap reducing agent as compared to the commercially available toxic and hazardous chemicals. Moreover, the purification of reduced GO (rGO) sheets can be avoided by using naturally occurring reducing agents. The obtained rGO sheets were characterised by Ultra violet visible, Fourier transform infrared, Raman and X-ray photo electron spectroscopy analysis. The morphologies were recorded by transmission electron and field emission scanning electron microscopy analysis and these showed the formation of a few layer rGO sheets. The electrical conductivity of rGO was found to be ∼410 S m{sup −1} at room temperature. Electrochemical performances were characterised by cyclic voltammetry, charge–discharge and electrochemical impedance spectroscopy analysis. A two electrode symmetric supercapacitor device was designed using nickel foam as current collector. The specific capacitance of the two-electrode device reached to 206 F g{sup −1} at a current density of 0.16 A g{sup −1}. The retention in specific capacitance was found to be ∼112% after 1000 charge–discharge cycles. - Highlights: • Reduced graphene has been prepared by bio-reduction of graphene oxide. • Few layers of graphene has been synthesised as observed by Raman spectra. • Two electrode based supercapacitors are fabricated. • Highest specific capacitance is found to be 206 F g{sup −1}. • Retention in specific capacitance is 112% after 1000 charge–discharge cycles.

Molecularly Imprinted Polypyrrole Based Impedimentric Sensor for Theophylline Determination

International Nuclear Information System (INIS)

Ratautaite, Vilma; Janssens, Stoffel D.; Haenen, Ken; Nesládek, Milos; Ramanaviciene, Almira; Baleviciute, Ieva; Ramanavicius, Arunas

2014-01-01

Highlights: • Sensor based on polypyrrole imprinted by theophylline (MIP) deposited on oxygen terminated boron-doped nanocrystalline diamond was developed. • This structure was applied as impedimetric sensor sensitive for theophylline. • Optimal polymer formation conditions suitable for MIP formation were elaborated. • Some analytical parameters were determined and evaluated. - Abstract: In this study development of impedimetric sensor based on oxygen terminated boron-doped nanocrystalline diamond (B:NCD:O) modified with theophylline imprinted polypyrrole is described. Hydrogen peroxide induced chemical formation of polypyrrole molecularly imprinted by theophylline was applied for the modification of conducting silicon substrate covered by B:NCD:O film. Non-imprinted polypyrrole layer was formed on similar substrate in order to prove efficiency of imprinted polypyrrole. Electrochemical impedance spectroscopy was applied for the evaluation of analyte-induced changes in electrochemical capacitance/resistance. The impact of polymerization duration on the capacitance of impedimetric sensor was estimated. A different impedance behavior was observed at different ratio of polymerized monomer and template molecule in the polymerization media. The influence of ethanol as additive to polymerization media on registered changes in capacitance/resistance was evaluated. Degradation of sensor stored in buffer solution was evaluated

Highly sensitive and selective SO2 MOF sensor: the integration of MFM-300 MOF as a sensitive layer on a capacitive interdigitated electrode

KAUST Repository

Chernikova, Valeriya; Yassine, Omar; Shekhah, Osama; Eddaoudi, Mohamed; Salama, Khaled N.

2018-01-01

We report on the fabrication of an advanced chemical capacitive sensor for the detection of sulfur dioxide (SO2) at room temperature. The sensing layer based on an indium metal–organic framework (MOF), namely MFM-300, is coated solvothermally on a functionalized capacitive interdigitated electrode. The fabricated sensor exhibits significant detection sensitivity to SO2 at concentrations down to 75 ppb, with the lower detection limit estimated to be around 5 ppb. The MFM-300 MOF sensor demonstrates highly desirable detection selectivity towards SO2 vs. CH4, CO2, NO2 and H2, as well as an outstanding SO2 sensing stability.

Highly sensitive and selective SO2 MOF sensor: the integration of MFM-300 MOF as a sensitive layer on a capacitive interdigitated electrode

KAUST Repository

Chernikova, Valeriya

2018-03-05

We report on the fabrication of an advanced chemical capacitive sensor for the detection of sulfur dioxide (SO2) at room temperature. The sensing layer based on an indium metal–organic framework (MOF), namely MFM-300, is coated solvothermally on a functionalized capacitive interdigitated electrode. The fabricated sensor exhibits significant detection sensitivity to SO2 at concentrations down to 75 ppb, with the lower detection limit estimated to be around 5 ppb. The MFM-300 MOF sensor demonstrates highly desirable detection selectivity towards SO2 vs. CH4, CO2, NO2 and H2, as well as an outstanding SO2 sensing stability.

Analysis of a Segmented Annular Coplanar Capacitive Tilt Sensor with Increased Sensitivity.

Science.gov (United States)

Guo, Jiahao; Hu, Pengcheng; Tan, Jiubin

2016-01-21

An investigation of a segmented annular coplanar capacitor is presented. We focus on its theoretical model, and a mathematical expression of the capacitance value is derived by solving a Laplace equation with Hankel transform. The finite element method is employed to verify the analytical result. Different control parameters are discussed, and each contribution to the capacitance value of the capacitor is obtained. On this basis, we analyze and optimize the structure parameters of a segmented coplanar capacitive tilt sensor, and three models with different positions of the electrode gap are fabricated and tested. The experimental result shows that the model (whose electrode-gap position is 10 mm from the electrode center) realizes a high sensitivity: 0.129 pF/° with a non-linearity of design.

CMOS capacitive biosensors for highly sensitive biosensing applications.

Science.gov (United States)

Chang, An-Yu; Lu, Michael S-C

2013-01-01

Magnetic microbeads are widely used in biotechnology and biomedical research for manipulation and detection of cells and biomolecules. Most lab-on-chip systems capable of performing manipulation and detection require external instruments to perform one of the functions, leading to increased size and cost. This work aims at developing an integrated platform to perform these two functions by implementing electromagnetic microcoils and capacitive biosensors on a CMOS (complementary metal oxide semiconductor) chip. Compared to most magnetic-type sensors, our detection method requires no externally applied magnetic fields and the associated fabrication is less complicated. In our experiment, microbeads coated with streptavidin were driven to the sensors located in the center of microcoils with functionalized anti-streptavidin antibody. Detection of a single microbead was successfully demonstrated using a capacitance-to-frequency readout. The average capacitance changes for the experimental and control groups were -5.3 fF and -0.2 fF, respectively.

A capacitive membrane MEMS microwave power sensor in the X-band based on GaAs MMIC technology

International Nuclear Information System (INIS)

Su Shi; Liao Xiaoping

2009-01-01

This paper presents the modeling, fabrication, and measurement of a capacitive membrane MEMS microwave power sensor. The sensor measures microwave power coupled from coplanar waveguide (CPW) transmission lines by a MEMS membrane and then converts it into a DC voltage output by using thermopiles. Since the fabrication process is fully compatible with the GaAs monolithic microwave integrated circuit (MMIC) process, this sensor could be conveniently embedded into MMIC. From the measured DC voltage output and S-parameters, the average sensitivity in the X-band is 225.43 μV/mW, while the reflection loss is below -14 dB. The MEMS microwave power sensor has good linearity with a voltage standing wave ration of less than 1.513 in the whole X-band. In addition, the measurements using amplitude modulation signals prove that the modulation index directly influences the output DC voltage.

A capacitive rf power sensor based on mems technology

NARCIS (Netherlands)

Fernandez, L.J.

2005-01-01

Existing power sensors for RF signals are based on thermistors, diodes and thermocouples. These power sensors are used as terminating devices and therefore they dissipate the complete incoming signal. Furthermore, new telecommunication systems require low weight, volume and power consumption and a

Equivalent distributed capacitance model of oxide traps on frequency dispersion of C-V curve for MOS capacitors

Science.gov (United States)

Lu, Han-Han; Xu, Jing-Ping; Liu, Lu; Lai, Pui-To; Tang, Wing-Man

2016-11-01

An equivalent distributed capacitance model is established by considering only the gate oxide-trap capacitance to explain the frequency dispersion in the C-V curve of MOS capacitors measured for a frequency range from 1 kHz to 1 MHz. The proposed model is based on the Fermi-Dirac statistics and the charging/discharging effects of the oxide traps induced by a small ac signal. The validity of the proposed model is confirmed by the good agreement between the simulated results and experimental data. Simulations indicate that the capacitance dispersion of an MOS capacitor under accumulation and near flatband is mainly caused by traps adjacent to the oxide/semiconductor interface, with negligible effects from the traps far from the interface, and the relevant distance from the interface at which the traps can still contribute to the gate capacitance is also discussed. In addition, by excluding the negligible effect of oxide-trap conductance, the model avoids the use of imaginary numbers and complex calculations, and thus is simple and intuitive. Project supported by the National Natural Science Foundation of China (Grant Nos. 61176100 and 61274112), the University Development Fund of the University of Hong Kong, China (Grant No. 00600009), and the Hong Kong Polytechnic University, China (Grant No. 1-ZVB1).

MEMS capacitive force sensors for cellular and flight biomechanics

International Nuclear Information System (INIS)

Sun Yu; Nelson, Bradley J

2007-01-01

Microelectromechanical systems (MEMS) are playing increasingly important roles in facilitating biological studies. They are capable of providing not only qualitative but also quantitative information on the cellular, sub-cellular and organism levels, which is instrumental to understanding the fundamental elements of biological systems. MEMS force sensors with their high bandwidth and high sensitivity combined with their small size, in particular, have found a role in this domain, because of the importance of quantifying forces and their effect on the function and morphology of many biological structures. This paper describes our research in the development of MEMS capacitive force sensors that have already demonstrated their effectiveness in the areas of cell mechanics and Drosophila flight dynamics studies. (review article)

Capacitive sensing of droplets for microfluidic devices based on thermocapillary actuation

NARCIS (Netherlands)

Chen, J.-Z.; Darhuber, A.A.; Troian, S.M.; Wagner, S.

2004-01-01

The design and performance of a miniaturized coplanar capacitive sensor is presented whose electrode arrays can also function as resistive microheaters for thermocapillary actuation of liquid films and droplets. Optimal compromise between large capacitive signal and high spatial resolution is

Transparent Fingerprint Sensor System for Large Flat Panel Display

Directory of Open Access Journals (Sweden)

Wonkuk Seo

2018-01-01

Full Text Available In this paper, we introduce a transparent fingerprint sensing system using a thin film transistor (TFT sensor panel, based on a self-capacitive sensing scheme. An armorphousindium gallium zinc oxide (a-IGZO TFT sensor array and associated custom Read-Out IC (ROIC are implemented for the system. The sensor panel has a 200 × 200 pixel array and each pixel size is as small as 50 μm × 50 μm. The ROIC uses only eight analog front-end (AFE amplifier stages along with a successive approximation analog-to-digital converter (SAR ADC. To get the fingerprint image data from the sensor array, the ROIC senses a capacitance, which is formed by a cover glass material between a human finger and an electrode of each pixel of the sensor array. Three methods are reviewed for estimating the self-capacitance. The measurement result demonstrates that the transparent fingerprint sensor system has an ability to differentiate a human finger’s ridges and valleys through the fingerprint sensor array.

Influence of oxidation level on capacitance of electrochemical capacitors fabricated with carbon nanotube/carbon paper composites

International Nuclear Information System (INIS)

Hsieh, C.-T.; Chen, W.-Y.; Cheng, Y.-S.

2010-01-01

Gaseous oxidation of carbon papers (CPs) decorated with carbon nanotubes (CNTs) with varying degrees of oxidation was conducted to investigate the influence of surface oxides on the performance of electrochemical capacitors fabricated with oxidized CNT/CP composites. The oxidation period was found to significantly enhance the O/C atomic ratio on the composites, and the increase in oxygen content upon oxidation is mainly contributed by the formation of C=O and C-O groups. The electrochemical behavior of the capacitors was tested in 1 M H 2 SO 4 within a potential of 0 and 1 V vs. Ag/AgCl. Both superhydrophilicity and specific capacitance of the oxidized CNT/CP composites were found to increase upon oxidation treatment. A linearity increase of capacitance with O/C ratio can be attributed to the increase of the population of surface oxides on CNTs, which imparts excess sites for redox reaction (pseudocapacitance) and for the formation of double-layer (double-layer capacitance). The technique of ac impedance combined with equivalent circuit clearly showed that oxidized CNT/CP capacitor imparts not only enhanced capacitance but also a low equivalent series resistance.

A nafion coated capacitive humidity sensor on a flexible PET substrate

KAUST Repository

Sapsanis, Christos

2017-03-07

This paper reports a simple and low-cost technique for fabricating low-power capacitive humidity sensors without the use of a cleanroom environment. A maskless laser engraving system was utilized to fabricate two different gold electrode structures, interdigitated electrodes and Hilbert\\'s fifth-order fractal. The capacitive structures were implemented on a flexible PET substrate. The usage of Nafion, a well-known polymer for its hydrophilic properties as a sensing film, was attempted on the PET and outperformed the current efforts in flexible substrates. Its humidity sensing properties were evaluated in an automated gas setup with a relative humidity (RH %) ranging from 15% to 95 %.

A nafion coated capacitive humidity sensor on a flexible PET substrate

KAUST Repository

Sapsanis, Christos; Buttner, Ulrich; Omran, Hesham; Belmabkhout, Youssef; Shekhah, Osama; Eddaoudi, Mohamed; Salama, Khaled N.

2017-01-01

This paper reports a simple and low-cost technique for fabricating low-power capacitive humidity sensors without the use of a cleanroom environment. A maskless laser engraving system was utilized to fabricate two different gold electrode structures, interdigitated electrodes and Hilbert's fifth-order fractal. The capacitive structures were implemented on a flexible PET substrate. The usage of Nafion, a well-known polymer for its hydrophilic properties as a sensing film, was attempted on the PET and outperformed the current efforts in flexible substrates. Its humidity sensing properties were evaluated in an automated gas setup with a relative humidity (RH %) ranging from 15% to 95 %.

Capacitive sensing of droplets for microfluidic devices based on thermocapillary actuation

OpenAIRE

Chen, Jian Z.; Darhuber, Anton A.; Troian, Sandra M.; Wagner, Sigurd

2004-01-01

The design and performance of a miniaturized coplanar capacitive sensor is presented whose electrode arrays can also function as resistive microheaters for thermocapillary actuation of liquid films and droplets. Optimal compromise between large capacitive signal and high spatial resolution is obtained for electrode widths comparable to the liquid film thickness measured, in agreement with supporting numerical simulations which include mutual capacitance effects. An interdigitated, variable wi...

Improvements in purification of silver nanowires by decantation and fabrication of flexible transparent electrodes. Application to capacitive touch sensors

International Nuclear Information System (INIS)

Mayousse, Céline; Celle, Caroline; Moreau, Eléonore; Carella, Alexandre; Simonato, Jean-Pierre; Mainguet, Jean-François

2013-01-01

Transparent flexible electrodes made of metallic nanowires, and in particular silver nanowires (AgNWs), appear as an extremely promising alternative to transparent conductive oxides for future optoelectronic devices. Though significant progresses have been made the last few years, there is still some room for improvement regarding the synthesis of high quality silver nanowire solutions and fabrication process of high performance electrodes. We show that the commonly used purification process can be greatly simplified through decantation. Using this process it is possible to fabricate flexible electrodes by spray coating with sheet resistance lower than 25 Ω sq −1 at 90% transparency in the visible spectrum. These electrodes were used to fabricate an operative transparent flexible touch screen. To our knowledge this is the first reported AgNW based touch sensor relying on capacitive technology. (paper)

Effects of electrochemical-deposition method and microstructure on the capacitive characteristics of nano-sized manganese oxide

International Nuclear Information System (INIS)

Shinomiya, Takuya; Gupta, Vinay; Miura, Norio

2006-01-01

The amorphous nano-structured manganese oxide was electrochemically deposited onto a stainless-steel electrode. The structure and surface morphology of the obtained manganese oxide were studied by means of X-ray diffraction analysis and scanning electron microscopy. The capacitive characteristics of the manganese oxide electrodes were investigated by means of cyclic voltammetry and constant current charge-discharge cycling. The morphological and capacitive characteristics of the hydrous manganese oxide was found to be strongly influenced by the electrochemical deposition conditions. The highest specific capacitance value of ca. 410 F g -1 and the specific power of ca. 54 kW kg -1 were obtained at 400 mV s -1 sweep rate of potentiodynamic deposition condition. The cyclic-life data showed that the specific capacitance was highly stable up to 10,000 cycles examined. This suggests the excellent cyclic stability of the obtained amorphous hydrous manganese oxide for supercapacitor application

Effects of electrochemical-deposition method and microstructure on the capacitive characteristics of nano-sized manganese oxide

Energy Technology Data Exchange (ETDEWEB)

Shinomiya, Takuya; Gupta, Vinay; Miura, Norio [Art, Science and Technology Center for Cooperative Research, Kyushu University, Kasuga-shi, Fukuoka 816-8580 (Japan)

2006-06-01

The amorphous nano-structured manganese oxide was electrochemically deposited onto a stainless-steel electrode. The structure and surface morphology of the obtained manganese oxide were studied by means of X-ray diffraction analysis and scanning electron microscopy. The capacitive characteristics of the manganese oxide electrodes were investigated by means of cyclic voltammetry and constant current charge-discharge cycling. The morphological and capacitive characteristics of the hydrous manganese oxide was found to be strongly influenced by the electrochemical deposition conditions. The highest specific capacitance value of ca. 410Fg{sup -1} and the specific power of ca. 54kWkg{sup -1} were obtained at 400mVs{sup -1} sweep rate of potentiodynamic deposition condition. The cyclic-life data showed that the specific capacitance was highly stable up to 10,000 cycles examined. This suggests the excellent cyclic stability of the obtained amorphous hydrous manganese oxide for supercapacitor application. (author)

Ultrahigh humidity sensitivity of graphene oxide.

Science.gov (United States)

Bi, Hengchang; Yin, Kuibo; Xie, Xiao; Ji, Jing; Wan, Shu; Sun, Litao; Terrones, Mauricio; Dresselhaus, Mildred S

2013-01-01

Humidity sensors have been extensively used in various fields, and numerous problems are encountered when using humidity sensors, including low sensitivity, long response and recovery times, and narrow humidity detection ranges. Using graphene oxide (G-O) films as humidity sensing materials, we fabricate here a microscale capacitive humidity sensor. Compared with conventional capacitive humidity sensors, the G-O based humidity sensor has a sensitivity of up to 37800% which is more than 10 times higher than that of the best one among conventional sensors at 15%-95% relative humidity. Moreover, our humidity sensor shows a fast response time (less than 1/4 of that of the conventional one) and recovery time (less than 1/2 of that of the conventional one). Therefore, G-O appears to be an ideal material for constructing humidity sensors with ultrahigh sensitivity for widespread applications.

A Novel Method for Proximity Detection of Moving Targets Using a Large-Scale Planar Capacitive Sensor System

Directory of Open Access Journals (Sweden)

Yong Ye

2016-05-01

Full Text Available A novel method for proximity detection of moving targets (with high dielectric constants using a large-scale (the size of each sensor is 31 cm × 19 cm planar capacitive sensor system (PCSS is proposed. The capacitive variation with distance is derived, and a pair of electrodes in a planar capacitive sensor unit (PCSU with a spiral shape is found to have better performance on sensitivity distribution homogeneity and dynamic range than three other shapes (comb shape, rectangular shape, and circular shape. A driving excitation circuit with a Clapp oscillator is proposed, and a capacitance measuring circuit with sensitivity of 0.21 V p − p / pF is designed. The results of static experiments and dynamic experiments demonstrate that the voltage curves of static experiments are similar to those of dynamic experiments; therefore, the static data can be used to simulate the dynamic curves. The dynamic range of proximity detection for three projectiles is up to 60 cm, and the results of the following static experiments show that the PCSU with four neighboring units has the highest sensitivity (the sensitivities of other units are at least 4% lower; when the attack angle decreases, the intensity of sensor signal increases. This proposed method leads to the design of a feasible moving target detector with simple structure and low cost, which can be applied in the interception system.

Feasibility of novel four degrees of freedom capacitive force sensor for skin interface force

Directory of Open Access Journals (Sweden)

Murakami Chisato

2012-11-01

Full Text Available Abstract Background The objective of our study was to develop a novel capacitive force sensor that enables simultaneous measurements of yaw torque around the pressure axis and normal force and shear forces at a single point for the purpose of elucidating pressure ulcer pathogenesis and establishing criteria for selection of cushions and mattresses. Methods Two newly developed sensors (approximately 10 mm×10 mm×5 mm (10 and 20 mm×20 mm×5 mm (20 were constructed from silicone gel and four upper and lower electrodes. The upper and lower electrodes had sixteen combinations that had the function as capacitors of parallel plate type. The full scale (FS ranges of force/torque were defined as 0–1.5 N, –0.5-0.5 N and −1.5-1.5 N mm (10 and 0–8.7 N, –2.9-2.9 N and −16.8-16.8 N mm (20 in normal force, shear forces and yaw torque, respectively. The capacitances of sixteen capacitors were measured by an LCR meter (AC1V, 100 kHz when displacements corresponding to four degrees of freedom (DOF forces within FS ranges were applied to the sensor. The measurement was repeated three times in each displacement condition (10 only. Force/torque were calculated by corrected capacitance and were evaluated by comparison to theoretical values and standard normal force measured by an universal tester. Results In measurements of capacitance, the coefficient of variation was 3.23% (10. The Maximum FS errors of estimated force/torque were less than or equal to 10.1 (10 and 16.4% (20, respectively. The standard normal forces were approximately 1.5 (10 and 9.4 N (20 when pressure displacements were 3 (10 and 2 mm (20, respectively. The estimated normal forces were approximately 1.5 (10 and 8.6 N (10 in the same condition. Conclusions In this study, we developed a new four DOF force sensor for measurement of force/torque that occur between the skin and a mattress. In measurement of capacitance, the repeatability was good and it was confirmed that the sensor had

Radio frequency and capacitive sensors for dielectric characterization of low-conductivity media

Science.gov (United States)

Sheldon, Robert T.

values of sensor resonant frequency was obtained for the samples studied. Agreement between calculated and measured quality factor was good in some cases but incurred the particular challenge of accurately quantifying multiple contributions to loss from the sensor structure itself, which at times dominates the contribution due to the sample material. Two later chapters describe the development of capacitive sensors to quantify the low-frequency changes in material permittivity due to environmental aging mechanisms. One embodiment involves the application of coplanar concentric interdigital electrode sensors for the purpose of investigating polymer-matrix degradation in glass-fiber composites due to isothermal aging. Samples of bismaleimide-matrix glass-fiber composites were aged at several high temperatures to induce thermal degradation and capacitive sensors were used to measure the sensor capacitance and dissipation factor, parameters that are directly proportional to the real and imaginary components of complex permittivity, respectively. It was shown that real permittivity and dissipation factor decreased with increasing aging temperature, a trend that was common to both interdigital sensor measurements and standard parallel plate electrode measurements. The second piece of work involves the development of cylindrical interdigital electrode sensors to characterize complex permittivity changes in wire insulation due to aging-related degradation. The sensor was proven effective in detecting changes in irradiated nuclear power plant wiring insulation and in aircraft wiring insulation due to liquid chemical immersion. In all three cases, the results indicate a clear correlation of measured capacitance and dissipation factor with increased degradation.

Enhanced specific capacitance of modified needle cokes by controlling oxidation treatment

International Nuclear Information System (INIS)

Yang, Sunhye; Kim, Ick-Jun; Choi, In-Sik; Soo Kim, Hyun; Tack Kim, Yu

2010-01-01

The electric double-layer performance of needle cokes can be affected by the morphology of structures. Hence, we introduce modified needle cokes by using simple oxidation treatment. The degree of graphitization with high specific capacitance is controlled by acid and heat treatment. The active sites of cokes are increased with increasing oxidation time. Dilute nitric acid (HNO 3 ) and sodium chlorate (NaClO 3 ) are used for the activation of cokes. In this case, the interlayer distance is dramatically increased from 3.5 to 8.9 A. The specific capacitances are 33 F g -1 and 30 F ml -1 , respectively, on a two-electrode system with a potential range of 0-2.5 V. The behaviors of double-layer capacitance are demonstrated by the charge-discharge process and the morphologies of modified needle cokes are analyzed by XRD, FE-SEM, BET and elemental analysis.

Capacitive sensor for engine oil deterioration measurement

Science.gov (United States)

Shinde, Harish; Bewoor, Anand

2018-04-01

A simple system or mechanism for engine Oil (lubricating oil) deterioration monitoring is a need. As engine oil is an important element in I C engines and it is exposed to various strains depending on the operating conditions. If it becomes contaminated with dirt and metal particles, it can become too thick or thin and loses its protective properties, leads to unwanted friction. In turn, to avoid an engine failure, the oil must be changed before it loses its protective properties, which may be harmful to engine which deteriorates vehicle performance. At the same time, changing the lubricant too early, cause inefficient use of already depleting resources, also unwanted impact on the environment and economic reasons. Hence, it will be always helpful to know the quality of the oil under use. With this objective, the research work had been undertaken to develop a simple capacitance sensor for quantification of the quality of oil under use. One of the investigated parameter to quantify oil degradation is Viscosity (as per standard testing procedure: DIN 51562-1). In this research work, an alternative method proposed which analyzing change in capacitance of oil, to quantify the quality of oil underuse and compared to a conventional standard method. The experimental results reported in this paper shows trend for the same. Engine oil of grade SAE 15W40 used for light-duty vehicle, vans and passenger cars is used for experimentation. Suggested method can form a base for further research to develop a cost-effective method for indicating the time to change in engine oil quality have been presented.

Capacitive MEMS-based sensors : thermo-mechanical stability and charge trapping

OpenAIRE

van Essen, M.C.

2009-01-01

Micro-Electro Mechanical Systems (MEMS) are generally characterized as miniaturized systems with electrostatically driven moving parts. In many cases, the electrodes are capacitively coupled. This basic scheme allows for a plethora of specifications and functionality. This technology has presently matured and is widely employed in industry. A voltage across the electrodes will attract the movable part. This relation between electric field and separation (or capacitance) can be conveniently em...

Measurement strategy for rectangular electrical capacitance tomography sensor

International Nuclear Information System (INIS)

Ye, Jiamin; Ge, Ruihuan; Qiu, Guizhi; Wang, Haigang

2014-01-01

To investigate the influence of the measurement strategy for the rectangular electrical capacitance tomography (ECT) sensor, a Finite Element Method (FEM) is utilized to create the model for simulation. The simulation was carried out using COMSOL Multiphysics(trade mark, serif) and Matlab(trade mark, serif). The length-width ratio of the rectangular sensing area is 5. Twelve electrodes are evenly arranged surrounding the pipe. The covering ratio of the electrodes is 90%. The capacitances between different electrode pairs are calculated for a bar distribution. The air of the relative permittivity 1.0 and the material of the permittivity 3.0 are used for the calibration. The relative permittivity of the second phase is 3.0. The noise free and noise data are used for the image reconstruction using the Linear Back Projection (LBP). The measurement strategies with 1-, 2- and 4- electrode excitation are compared using the correlation coefficient. Preliminary results show that the measurement strategy with 2-electrode excitation outperforms other measurement strategies with 1- or 4-electrode excitation

Devices for measuring the capacitance of micromechanical sensors of mobile robots navigation systems and its deviation from the nominal value

Directory of Open Access Journals (Sweden)

Rudyk A.V.

2016-12-01

Full Text Available The article describes methods of constructing devices for measuring the capacitance of micromechanical sensors (accelerometers and gyros mobile robots navigation systems and its deviation from the nominal value. A modified diagram of a sigma-delta modulator is offered. It realizes a direct connection capacitive sensor connection to the sigma-delta converter, as a result increased resolution, accuracy and linearity of the conversion. This interface is insensitive to the value of capacitance between the sensor leads and common wire or leakage current to a common wire. Variants of expansion as the nominal of the test capacity and the range of conversion of the relative deviation of the nominal capacity using two integrators are offered. The versions of circuit implementation devices for measuring the capacitance deviation of a micromechanical sensor from the nominal value are designed on the basis of the completed integrated circuit AD7745 / AD7746 and AD7747 of Analog Devices, CAV414 / 424 firm Analog Microelectronics and precision analog microcontroller ADuCM360 / CM361 company ARM Limited.

A Neural Network Approach to Fluid Level Measurement in Dynamic Environments Using a Single Capacitive Sensor

Directory of Open Access Journals (Sweden)

Edin TERZIC

2010-03-01

Full Text Available A measurement system has been developed using a single tube capacitive sensor to accurately determine the fluid level in vehicular fuel tanks. A novel approach based on artificial neural networks based signal pre-processing and classification has been described in this article. A broad investigation on the Backpropagation neural network and some selected signal pre-processing filters, namely, Moving Mean, Moving Median, and Wavelet Filter has also been presented. An on field drive trial was conducted under normal driving conditions at various fuel volumes ranging from 5 L to 50 L to acquire training samples from the capacitive sensor. A second field trial was conducted to obtain test samples to verify the performance of the neural network. The neural network was trained and verified with 50 % of the training and test samples. The results obtained using the neural network approach having different filtration methods are compared with the results obtained using simple Moving Mean and Moving Median functions. It is demonstrated that the Backpropagation neural network with Moving Median filter produced the most accurate outcome compared with the other signal filtration methods.

Assessment of an ultrasonic sensor and a capacitance probe for measurement of two-phase mixture level

International Nuclear Information System (INIS)

Kim, Chang Hyun; Lee, Dong Won; No, Hee Cheon

2004-01-01

We perform a comparison of two-phase mixture levels measured by an ultrasonic sensor and a two-wire type capacitance probe with visual data under the same experimental conditions. A series of experiments are performed with various combinations of airflow and initial water level using a test vessel with a height of 2m and an inner diameter of 0.3 m under atmospheric pressure and room temperature. The ultrasonic sensor measures the two-phase mixture level with a maximum error of 1.77% with respect to the visual data. The capacitance probe severely under-predicts the level data in the high void fraction region. The cause of the error is identified as the change of the dielectric constant as the void fraction changes when the probe is applied to the measurement of the two-phase mixture levels. A correction method for the capacitance probe is proposed by correcting the change of dielectric constant of the two-phase mixture. The correction method for the capacitance probe produces a r.m.s. error of 5.4%. (author)

Coplanar capacitance sensors for detecting water intrusion in composite structures

International Nuclear Information System (INIS)

Nassr, Amr A; El-Dakhakhni, Wael W; Ahmed, Wael H

2008-01-01

Composite materials are becoming more affordable and widely used for retrofitting, rehabilitating and repairing reinforced concrete structures designed and constructed under older specifications. However, the mechanical properties and long-term durability of composite materials may degrade severely in the presence of water intrusion. This study presents a new non-destructive evaluation (NDE) technique for detecting the water intrusion in composite structures by evaluating the dielectric properties of different composite system constituent materials. The variation in the dielectric signatures was employed to design a coplanar capacitance sensor with high sensitivity to detect such defects. An analytical model was used to study the effect of the sensor geometry on the output signal and to optimize sensor design. A finite element model was developed to validate analytical results and to evaluate other sensor design-related parameters. Experimental testing of a concrete specimen wrapped with composite laminate and containing a series of pre-induced water intrusion defects was conducted in order to validate the concept of the new technique. Experimental data showed excellent agreement with the finite element model predictions and confirmed sensor performance

Highly selective gas sensor arrays based on thermally reduced graphene oxide.

Science.gov (United States)

Lipatov, Alexey; Varezhnikov, Alexey; Wilson, Peter; Sysoev, Victor; Kolmakov, Andrei; Sinitskii, Alexander

2013-06-21

The electrical properties of reduced graphene oxide (rGO) have been previously shown to be very sensitive to surface adsorbates, thus making rGO a very promising platform for highly sensitive gas sensors. However, poor selectivity of rGO-based gas sensors remains a major problem for their practical use. In this paper, we address the selectivity problem by employing an array of rGO-based integrated sensors instead of focusing on the performance of a single sensing element. Each rGO-based device in such an array has a unique sensor response due to the irregular structure of rGO films at different levels of organization, ranging from nanoscale to macroscale. The resulting rGO-based gas sensing system could reliably recognize analytes of nearly the same chemical nature. In our experiments rGO-based sensor arrays demonstrated a high selectivity that was sufficient to discriminate between different alcohols, such as methanol, ethanol and isopropanol, at a 100% success rate. We also discuss a possible sensing mechanism that provides the basis for analyte differentiation.

Fringe effect of electrical capacitance and resistance tomography sensors

International Nuclear Information System (INIS)

Sun, Jiangtao; Yang, Wuqiang

2013-01-01

Because of the ‘soft-field’ nature, all electrical tomography sensors suffer from electric field distortion, i.e. the fringe effect. In electrical resistance tomography (ERT) sensors, small pin electrodes are commonly used. It is well known that the pin electrodes result in severe electric field distortion or the fringe effect, and the sensing region of such an ERT sensor spreads out of the pin electrode plane to a large volume. This is also true for electrical capacitance tomography (ECT) sensors, even though it is less severe because of larger electrodes and grounded end guards used. However, when the length of electrodes in an ECT sensor without guards is reduced to almost the same dimension as those in an ERT sensor, the fringe effect is equally obvious. To investigate the fringe effect of ERT and ECT sensors with and without guards, simulations were carried out with different length of electrodes and the results are compared with the corresponding 2D simulation. It is concluded that ECT and ERT sensors with longer electrodes have less fringe effect. Because grounded end guards are effective in reducing the fringe effect of ECT sensors, we propose to apply grounded guards in ERT sensors and integrate ECT and ERT sensors together. Simulation results reveal that ERT sensors with grounded guards have less fringe effect. While commonly current excitation is used with ERT sensors, we propose voltage excitation instead to apply the grounded guards. The feasibility of this approach has been verified by experiment. Finally, a common structure for reducing the fringe effect is proposed for ECT and ERT sensors for the first time to simplify the sensor structure and reduce the mutual interference in ECT/ERT dual-modality measurements. (paper)

Gate tunneling current and quantum capacitance in metal-oxide-semiconductor devices with graphene gate electrodes

Science.gov (United States)

An, Yanbin; Shekhawat, Aniruddh; Behnam, Ashkan; Pop, Eric; Ural, Ant

2016-11-01

Metal-oxide-semiconductor (MOS) devices with graphene as the metal gate electrode, silicon dioxide with thicknesses ranging from 5 to 20 nm as the dielectric, and p-type silicon as the semiconductor are fabricated and characterized. It is found that Fowler-Nordheim (F-N) tunneling dominates the gate tunneling current in these devices for oxide thicknesses of 10 nm and larger, whereas for devices with 5 nm oxide, direct tunneling starts to play a role in determining the total gate current. Furthermore, the temperature dependences of the F-N tunneling current for the 10 nm devices are characterized in the temperature range 77-300 K. The F-N coefficients and the effective tunneling barrier height are extracted as a function of temperature. It is found that the effective barrier height decreases with increasing temperature, which is in agreement with the results previously reported for conventional MOS devices with polysilicon or metal gate electrodes. In addition, high frequency capacitance-voltage measurements of these MOS devices are performed, which depict a local capacitance minimum under accumulation for thin oxides. By analyzing the data using numerical calculations based on the modified density of states of graphene in the presence of charged impurities, it is shown that this local minimum is due to the contribution of the quantum capacitance of graphene. Finally, the workfunction of the graphene gate electrode is extracted by determining the flat-band voltage as a function of oxide thickness. These results show that graphene is a promising candidate as the gate electrode in metal-oxide-semiconductor devices.

Development and Application of the Single-Spiral Inductive-Capacitive Resonant Circuit Sensor for Wireless, Real-Time Characterization of Moisture in Sand

Directory of Open Access Journals (Sweden)

Andrew J. DeRouin

2013-01-01

Full Text Available A wireless, passive embedded sensor was designed and fabricated for monitoring moisture in sand. The sensor, consisted of an inductive-capacitive (LC resonant circuit, was made of a printed spiral inductor embedded inside sand. When exposed to an electromagnetic field, the sensor resonated at a specific frequency dependent on the inductance of the inductor and its parasitic capacitance. Since the permittivity of water was much higher than dry sand, moisture in sample increased the parasitic capacitance, thus decreasing the sensor’s resonant frequency. Therefore, the internal moisture level of the sample could be easily measured through tracking the resonant frequency using a detection coil. The fabrication process of this sensor is much simpler compared to LC sensors that contain both capacitive and inductive elements, giving it an economical advantage. A study was conducted to investigate the drying rate of sand samples of different grain sizes. The experimental data showed a strong correlation with the actual moisture content in the samples. The described sensor technology can be applied for long term monitoring of localized water content inside soils and sands to understand the environmental health in these media, or monitoring moisture levels within concrete supports and road pavement.

The Calibration and Use of Capacitance Sensors to Monitor Stem Water Content in Trees.

Science.gov (United States)

Matheny, Ashley M; Garrity, Steven R; Bohrer, Gil

2017-12-27

Water transport and storage through the soil-plant-atmosphere continuum is critical to the terrestrial water cycle, and has become a major research focus area. Biomass capacitance plays an integral role in the avoidance of hydraulic impairment to transpiration. However, high temporal resolution measurements of dynamic changes in the hydraulic capacitance of large trees are rare. Here, we present procedures for the calibration and use of capacitance sensors, typically used to monitor soil water content, to measure the volumetric water content in trees in the field. Frequency domain reflectometry-style observations are sensitive to the density of the media being studied. Therefore, it is necessary to perform species-specific calibrations to convert from the sensor-reported values of dielectric permittivity to volumetric water content. Calibration is performed on a harvested branch or stem cut into segments that are dried or re-hydrated to produce a full range of water contents used to generate a best-fit regression with sensor observations. Sensors are inserted into calibration segments or installed in trees after pre-drilling holes to a tolerance fit using a fabricated template to ensure proper drill alignment. Special care is taken to ensure that sensor tines make good contact with the surrounding media, while allowing them to be inserted without excessive force. Volumetric water content dynamics observed via the presented methodology align with sap flow measurements recorded using thermal dissipation techniques and environmental forcing data. Biomass water content data can be used to observe the onset of water stress, drought response and recovery, and has the potential to be applied to the calibration and evaluation of new plant-level hydrodynamics models, as well as to the partitioning of remotely sensed moisture products into above- and belowground components.

Electrical characterization of γ-Al2O3 thin film parallel plate capacitive sensor for trace moisture detection

Science.gov (United States)

Kumar, Lokesh; Kumar, Shailesh; Khan, S. A.; Islam, Tariqul

2012-10-01

A moisture sensor was fabricated based on porous thin film of γ-Al2O3 formed between the parallel gold electrodes. The sensor works on capacitive technique. The sensing film was fabricated by dipcoating of aluminium hydroxide sol solution obtained from the sol-gel method. The porous structure of the film of γ-Al2O3 phase was obtained by sintering the film at 450 °C for 1 h. The electrical parameters of the sensor have been determined by Agilent 4294A impedance analyzer. The sensor so obtained is found to be sensitive in moisture range 100-600 ppmV. The response time of the sensor in ppmV range moisture is very low ~ 24 s and recovery time is ~ 37 s.

Demonstration of a Packaged Capacitive Pressure Sensor System Suitable for Jet Turbofan Engine Health Monitoring

Science.gov (United States)

Scardelletti, Maximilian C.; Jordan, Jennifer L.; Meredith, Roger D.; Harsh, Kevin; Pilant, Evan; Usrey, Michael W.; Beheim, Glenn M.; Hunter, Gary W.; Zorman, Christian A.

2016-01-01

In this paper, the development and characterization of a packaged pressure sensor system suitable for jet engine health monitoring is demonstrated. The sensing system operates from 97 to 117 MHz over a pressure range from 0 to 350 psi and a temperature range from 25 to 500 deg. The sensing system consists of a Clapp-type oscillator that is fabricated on an alumina substrate and is comprised of a Cree SiC MESFET, MIM capacitors, a wire-wound inductor, chip resistors and a SiCN capacitive pressure sensor. The pressure sensor is located in the LC tank circuit of the oscillator so that a change in pressure causes a change in capacitance, thus changing the resonant frequency of the sensing system. The chip resistors, wire-wound inductors and MIM capacitors have all been characterized at temperature and operational frequency, and perform with less than 5% variance in electrical performance. The measured capacitive pressure sensing system agrees very well with simulated results. The packaged pressure sensing system is specifically designed to measure the pressure on a jet turbofan engine. The packaged system can be installed by way of borescope plug adaptor fitted to a borescope port exposed to the gas path of a turbofan engine.

PALLADIUM DOPED TIN OXIDE BASED HYDROGEN GAS SENSORS FOR SAFETY APPLICATIONS

International Nuclear Information System (INIS)

Kasthurirengan, S.; Behera, Upendra; Nadig, D. S.

2010-01-01

Hydrogen is considered to be a hazardous gas since it forms a flammable mixture between 4 to 75% by volume in air. Hence, the safety aspects of handling hydrogen are quite important. For this, ideally, highly selective, fast response, small size, hydrogen sensors are needed. Although sensors based on different technologies may be used, thin-film sensors based on palladium (Pd) are preferred due to their compactness and fast response. They detect hydrogen by monitoring the changes to the electrical, mechanical or optical properties of the films. We report the development of Pd-doped tin-oxide based gas sensors prepared on thin ceramic substrates with screen printed platinum (Pt) contacts and integrated nicrome wire heaters. The sensors are tested for their performances using hydrogen-nitrogen gas mixtures to a maximum of 4%H 2 in N 2 . The sensors detect hydrogen and their response times are less than a few seconds. Also, the sensor performance is not altered by the presence of helium in the test gas mixtures. By the above desired performance characteristics, field trials of these sensors have been undertaken. The paper presents the details of the sensor fabrication, electronic circuits, experimental setup for evaluation and the test results.

Measurement system for nitrous oxide based on amperometric gas sensor

Science.gov (United States)

Siswoyo, S.; Persaud, K. C.; Phillips, V. R.; Sneath, R.

2017-03-01

It has been well known that nitrous oxide is an important greenhouse gas, so monitoring and control of its concentration and emission is very important. In this work a nitrous oxide measurement system has been developed consisting of an amperometric sensor and an appropriate lab-made potentiostat that capable measuring picoampere current ranges. The sensor was constructed using a gold microelectrode as working electrode surrounded by a silver wire as quasi reference electrode, with tetraethyl ammonium perchlorate and dimethylsulphoxide as supporting electrolyte and solvent respectively. The lab-made potentiostat was built incorporating a transimpedance amplifier capable of picoampere measurements. This also incorporated a microcontroller based data acquisition system, controlled by a host personal computer using a dedicated computer program. The system was capable of detecting N2O concentrations down to 0.07 % v/v.

Wireless Capacitive Pressure Sensor Operating up to 400 Celcius from 0 to 100 psi Utilizing Power Scavenging

Science.gov (United States)

Scardelletti, Maximilian C.; Ponchak, George E.; Harsh, Kevin; Mackey, Jonathan A.; Meredith, Roger D.; Zorman, Christian A.; Beheim, Glenn M.; Dynys, Frederick W.; Hunter, Gary W.

2014-01-01

In this paper, a wireless capacitive pressure sensor developed for the health monitoring of aircraft engines has been demonstrated. The sensing system is composed of a Clapp-type oscillator that operates at 131 MHz. The Clapp oscillator is fabricated on a alumina substrate and consists of a Cree SiC (silicon carbide) MESFET (Metal Semiconductor Field Effect Transistors), this film inductor, Compex chip capacitors and Sporian Microsystem capacitive pressure sensor. The resonant tank circuit within the oscillator is made up of the pressure sensor and a spiral thin film inductor, which is used to magnetically couple the wireless pressure sensor signal to a coil antenna placed over 1 meter away. 75% of the power used to bias the sensing system is generated from thermoelectric power modules. The wireless pressure sensor is operational at room temperature through 400 C from 0 to 100 psi and exhibits a frequency shift of over 600 kHz.

Virtual Distances Methodology as Verification Technique for AACMMs with a Capacitive Sensor Based Indexed Metrology Platform

Science.gov (United States)

Acero, Raquel; Santolaria, Jorge; Brau, Agustin; Pueo, Marcos

2016-01-01

This paper presents a new verification procedure for articulated arm coordinate measuring machines (AACMMs) together with a capacitive sensor-based indexed metrology platform (IMP) based on the generation of virtual reference distances. The novelty of this procedure lays on the possibility of creating virtual points, virtual gauges and virtual distances through the indexed metrology platform’s mathematical model taking as a reference the measurements of a ball bar gauge located in a fixed position of the instrument’s working volume. The measurements are carried out with the AACMM assembled on the IMP from the six rotating positions of the platform. In this way, an unlimited number and types of reference distances could be created without the need of using a physical gauge, therefore optimizing the testing time, the number of gauge positions and the space needed in the calibration and verification procedures. Four evaluation methods are presented to assess the volumetric performance of the AACMM. The results obtained proved the suitability of the virtual distances methodology as an alternative procedure for verification of AACMMs using the indexed metrology platform. PMID:27869722

Virtual Distances Methodology as Verification Technique for AACMMs with a Capacitive Sensor Based Indexed Metrology Platform.

Science.gov (United States)

Acero, Raquel; Santolaria, Jorge; Brau, Agustin; Pueo, Marcos

2016-11-18

This paper presents a new verification procedure for articulated arm coordinate measuring machines (AACMMs) together with a capacitive sensor-based indexed metrology platform (IMP) based on the generation of virtual reference distances. The novelty of this procedure lays on the possibility of creating virtual points, virtual gauges and virtual distances through the indexed metrology platform's mathematical model taking as a reference the measurements of a ball bar gauge located in a fixed position of the instrument's working volume. The measurements are carried out with the AACMM assembled on the IMP from the six rotating positions of the platform. In this way, an unlimited number and types of reference distances could be created without the need of using a physical gauge, therefore optimizing the testing time, the number of gauge positions and the space needed in the calibration and verification procedures. Four evaluation methods are presented to assess the volumetric performance of the AACMM. The results obtained proved the suitability of the virtual distances methodology as an alternative procedure for verification of AACMMs using the indexed metrology platform.

A 3D Faraday Shield for Interdigitated Dielectrometry Sensors and Its Effect on Capacitance.

Science.gov (United States)

Risos, Alex; Long, Nicholas; Hunze, Arvid; Gouws, Gideon

2016-12-31

Interdigitated dielectrometry sensors (IDS) are capacitive sensors investigated to precisely measure the relative permittivity ( ϵ r ) of insulating liquids. Such liquids used in the power industry exhibit a change in ϵ r as they degrade. The IDS ability to measure ϵ r in-situ can potentially reduce maintenance, increase grid stability and improve safety. Noise from external electric field sources is a prominent issue with IDS. This paper investigates the novelty of applying a Faraday cage onto an IDS as a 3D shield to reduce this noise. This alters the spatially distributed electric field of an IDS affecting its sensing properties. Therefore, dependency of the sensor's signal with the distance to a shield above the IDS electrodes has been investigated experimentally and theoretically via a Green's function calculation and FEM. A criteria of the shield's distance s = s 0 has been defined as the distance which gives a capacitance for the IDS equal to 1 - e - 2 = 86.5 % of its unshielded value. Theoretical calculations using a simplified geometry gave a constant value for s 0 / λ = 1.65, where λ is the IDS wavelength. In the experiment, values for s 0 were found to be lower than predicted as from theory and the ratio s 0 / λ variable. This was analyzed in detail and it was found to be resulting from the specific spatial structure of the IDS. A subsequent measurement of a common insulating liquid with a nearby noise source demonstrates a considerable reduction in the standard deviation of the relative permittivity from σ unshielded = ± 9.5% to σ shielded = ± 0.6%. The presented findings enhance our understanding of IDS in respect to the influence of a Faraday shield on the capacitance, parasitic capacitances of the IDS and external noise impact on the measurement of ϵ r .

Two-Dimensional Micro-/Nanoradian Angle Generator with High Resolution and Repeatability Based on Piezo-Driven Double-Axis Flexure Hinge and Three Capacitive Sensors.

Science.gov (United States)

Tan, Xinran; Zhu, Fan; Wang, Chao; Yu, Yang; Shi, Jian; Qi, Xue; Yuan, Feng; Tan, Jiubin

2017-11-19

This study presents a two-dimensional micro-/nanoradian angle generator (2D-MNAG) that achieves high angular displacement resolution and repeatability using a piezo-driven flexure hinge for two-dimensional deflections and three capacitive sensors for output angle monitoring and feedback control. The principal error of the capacitive sensor for precision microangle measurement is analyzed and compensated for; so as to achieve a high angle output resolution of 10 nrad (0.002 arcsec) and positioning repeatability of 120 nrad (0.024 arcsec) over a large angular range of ±4363 μrad (±900 arcsec) for the 2D-MNAG. The impact of each error component, together with the synthetic error of the 2D-MNAG after principal error compensation are determined using Monte Carlo simulation for further improvement of the 2D-MNAG.

Electrochemical Impedance Spectroscopic Analysis of RuO2 Based Thick Film pH Sensors

International Nuclear Information System (INIS)

Manjakkal, Libu; Djurdjic, Elvira; Cvejin, Katarina; Kulawik, Jan; Zaraska, Krzysztof; Szwagierczak, Dorota

2015-01-01

The conductimetric interdigitated thick film pH sensors based on RuO 2 were fabricated and their electrochemical reactions with solutions of different pH values were studied by electrochemical impedance spectroscopy (EIS) technique. The microstructural properties and composition of the sensitive films were examined by scanning electron microscopy, X-ray energy dispersive spectroscopy and Raman spectroscopy. The EIS analysis of the sensor was carried out in the frequency range 10 mHz–2 MHz for pH values of test solutions 2–12. The electrical parameters of the sensor were found to vary with changing pH. The conductance and capacitance of the film were distinctly dependent on pH in the low frequency range. The Nyquist and Bode plots derived from the impedance data for the metal oxide thick film pH sensor provided information about the underlying electrochemical reactions

Surface Embedded Metal Oxide Sensors (SEMOS)

DEFF Research Database (Denmark)

Jespersen, Jesper Lebæk; Talat Ali, Syed; Pleth Nielsen, Lars

SEMOS is a joint project between Aalborg University, Danish Technological Institute and Danish Technical University in which micro temperature sensors and metal oxide-based gas sensors are developed and tested in a simulated fuel cell environment as well as in actual working fuel cells. Initially......, sensors for measuring the temperatures in an operating HT-PEM (High Temperature-Proton Exchange Membrane) fuel cell are developed for detecting in-plane temperature variations. 5 different tracks for embedded thermal sensors are investigated. The fuel cell MEA (Membrane Electrode Assembly) is quite...... complex and sensors are not easily implemented in the construction. Hence sensor interface and sensor position must therefore be chosen carefully in order to make the sensors as non-intrusive as possible. Metal Oxide Sensors (MOX) for measuring H2, O2 and CO concentration in a fuel cell environment...

A 45.8fJ/Step, energy-efficient, differential SAR capacitance-to-digital converter for capacitive pressure sensing

KAUST Repository

Alhoshany, Abdulaziz

2016-05-03

An energy-efficient readout circuit for a capacitive sensor is presented. The capacitive sensor is digitized by a 12-bit energy efficient capacitance-to-digital converter (CDC) that is based on a differential successive-approximation architecture. This CDC meets extremely low power requirements by using an operational transconductance amplifier (OTA) that is based on a current-starved inverter. It uses a charge-redistribution DAC that involves coarse-fine architecture. We split the DAC into a coarse-DAC and a fine-DAC to allow a wide capacitance range in a compact area. It covers a wide range of capacitance of 16.14 pF with a 4.5 fF absolute resolution. An analog comparator is implemented by cross-coupling two 3-input NAND gates to enable power and area efficient operation. The prototype CDC was fabricated using a standard 180 nm CMOS technology. The 12-bit CDC has a measurement time of 42.5 μs, and consumes 3.54 μW and 0.29 μW from analog and digital supplies, respectively. This corresponds to a state-of-the-art figure-of-merit (FoM) of 45.8 fJ/conversion-step. © 2016 Elsevier B.V. All rights reserved.

A 45.8fJ/Step, energy-efficient, differential SAR capacitance-to-digital converter for capacitive pressure sensing

KAUST Repository

Alhoshany, Abdulaziz; Omran, Hesham; Salama, Khaled N.

2016-01-01

An energy-efficient readout circuit for a capacitive sensor is presented. The capacitive sensor is digitized by a 12-bit energy efficient capacitance-to-digital converter (CDC) that is based on a differential successive-approximation architecture. This CDC meets extremely low power requirements by using an operational transconductance amplifier (OTA) that is based on a current-starved inverter. It uses a charge-redistribution DAC that involves coarse-fine architecture. We split the DAC into a coarse-DAC and a fine-DAC to allow a wide capacitance range in a compact area. It covers a wide range of capacitance of 16.14 pF with a 4.5 fF absolute resolution. An analog comparator is implemented by cross-coupling two 3-input NAND gates to enable power and area efficient operation. The prototype CDC was fabricated using a standard 180 nm CMOS technology. The 12-bit CDC has a measurement time of 42.5 μs, and consumes 3.54 μW and 0.29 μW from analog and digital supplies, respectively. This corresponds to a state-of-the-art figure-of-merit (FoM) of 45.8 fJ/conversion-step. © 2016 Elsevier B.V. All rights reserved.

Analysis of a Segmented Annular Coplanar Capacitive Tilt Sensor with Increased Sensitivity

Directory of Open Access Journals (Sweden)

Jiahao Guo

2016-01-01

Full Text Available An investigation of a segmented annular coplanar capacitor is presented. We focus on its theoretical model, and a mathematical expression of the capacitance value is derived by solving a Laplace equation with Hankel transform. The finite element method is employed to verify the analytical result. Different control parameters are discussed, and each contribution to the capacitance value of the capacitor is obtained. On this basis, we analyze and optimize the structure parameters of a segmented coplanar capacitive tilt sensor, and three models with different positions of the electrode gap are fabricated and tested. The experimental result shows that the model (whose electrode-gap position is 10 mm from the electrode center realizes a high sensitivity: 0.129 pF/° with a non-linearity of <0.4% FS (full scale of ±40°. This finding offers plenty of opportunities for various measurement requirements in addition to achieving an optimized structure in practical design.

Low temperature co-fired ceramic packaging of CMOS capacitive sensor chip towards cell viability monitoring.

Science.gov (United States)

Halonen, Niina; Kilpijärvi, Joni; Sobocinski, Maciej; Datta-Chaudhuri, Timir; Hassinen, Antti; Prakash, Someshekar B; Möller, Peter; Abshire, Pamela; Kellokumpu, Sakari; Lloyd Spetz, Anita

2016-01-01

Cell viability monitoring is an important part of biosafety evaluation for the detection of toxic effects on cells caused by nanomaterials, preferably by label-free, noninvasive, fast, and cost effective methods. These requirements can be met by monitoring cell viability with a capacitance-sensing integrated circuit (IC) microchip. The capacitance provides a measurement of the surface attachment of adherent cells as an indication of their health status. However, the moist, warm, and corrosive biological environment requires reliable packaging of the sensor chip. In this work, a second generation of low temperature co-fired ceramic (LTCC) technology was combined with flip-chip bonding to provide a durable package compatible with cell culture. The LTCC-packaged sensor chip was integrated with a printed circuit board, data acquisition device, and measurement-controlling software. The packaged sensor chip functioned well in the presence of cell medium and cells, with output voltages depending on the medium above the capacitors. Moreover, the manufacturing of microfluidic channels in the LTCC package was demonstrated.

Post annealing performance evaluation of printable interdigital capacitive sensors by principal component analysis

KAUST Repository

Zia, Asif Iqbal

2015-06-01

The surface roughness of thin-film gold electrodes induces instability in impedance spectroscopy measurements of capacitive interdigital printable sensors. Post-fabrication thermodynamic annealing was carried out at temperatures ranging from 30 °C to 210 °C in a vacuum oven and the variation in surface morphology of thin-film gold electrodes was observed by scanning electron microscopy. Impedance spectra obtained at different temperatures were translated into equivalent circuit models by applying complex nonlinear least square curve-fitting algorithm. Principal component analysis was applied to deduce the classification of the parameters affected due to the annealing process and to evaluate the performance stability using mathematical model. Physics of the thermodynamic annealing was discussed based on the surface activation energies. The post anneal testing of the sensors validated the achieved stability in impedance measurement. © 2001-2012 IEEE.

Post annealing performance evaluation of printable interdigital capacitive sensors by principal component analysis

KAUST Repository

Zia, Asif Iqbal; Mukhopadhyay, Subhas Chandra; Yu, Paklam; Al-Bahadly, Ibrahim H.; Gooneratne, Chinthaka Pasan; Kosel, Jü rgen

2015-01-01

The surface roughness of thin-film gold electrodes induces instability in impedance spectroscopy measurements of capacitive interdigital printable sensors. Post-fabrication thermodynamic annealing was carried out at temperatures ranging from 30 °C to 210 °C in a vacuum oven and the variation in surface morphology of thin-film gold electrodes was observed by scanning electron microscopy. Impedance spectra obtained at different temperatures were translated into equivalent circuit models by applying complex nonlinear least square curve-fitting algorithm. Principal component analysis was applied to deduce the classification of the parameters affected due to the annealing process and to evaluate the performance stability using mathematical model. Physics of the thermodynamic annealing was discussed based on the surface activation energies. The post anneal testing of the sensors validated the achieved stability in impedance measurement. © 2001-2012 IEEE.

Wireless Capacitive Pressure Sensor With Directional RF Chip Antenna for High Temperature Environments

Science.gov (United States)

Scardelletti, M. C.; Jordan, J. L.; Ponchak, G. E.; Zorman, C. A.

2015-01-01

This paper presents the design, fabrication and characterization of a wireless capacitive pressure sensor with directional RF chip antenna that is envisioned for the health monitoring of aircraft engines operating in harsh environments. The sensing system is characterized from room temperature (25 C) to 300 C for a pressure range from 0 to 100 psi. The wireless pressure system consists of a Clapp-type oscillator design with a capacitive MEMS pressure sensor located in the LC-tank circuit of the oscillator. Therefore, as the pressure of the aircraft engine changes, so does the output resonant frequency of the sensing system. A chip antenna is integrated to transmit the system output to a receive antenna 10 m away.The design frequency of the wireless pressure sensor is 127 MHz and a 2 increase in resonant frequency over the temperature range of 25 to 300 C from 0 to 100 psi is observed. The phase noise is less than minus 30 dBcHz at the 1 kHz offset and decreases to less than minus 80 dBcHz at 10 kHz over the entire temperature range. The RF radiation patterns for two cuts of the wireless system have been measured and show that the system is highly directional and the MEMS pressure sensor is extremely linear from 0 to 100 psi.

Screen printing of a capacitive cantilever-based motion sensor on fabric using a novel sacrificial layer process for smart fabric applications

Science.gov (United States)

Wei, Yang; Torah, Russel; Yang, Kai; Beeby, Steve; Tudor, John

2013-07-01

Free-standing cantilevers have been fabricated by screen printing sacrificial and structural layers onto a standard polyester cotton fabric. By printing additional conductive layers, a complete capacitive motion sensor on fabric using only screen printing has been fabricated. This type of free-standing structure cannot currently be fabricated using conventional fabric manufacturing processes. In addition, compared to conventional smart fabric fabrication processes (e.g. weaving and knitting), screen printing offers the advantages of geometric design flexibility and the ability to simultaneously print multiple devices of the same or different designs. Furthermore, a range of active inks exists from the printed electronics industry which can potentially be applied to create many types of smart fabric. Four cantilevers with different lengths have been printed on fabric using a five-layer structure with a sacrificial material underneath the cantilever. The sacrificial layer is subsequently removed at 160 °C for 30 min to achieve a freestanding cantilever above the fabric. Two silver electrodes, one on top of the cantilever and the other on top of the fabric, are used to capacitively detect the movement of the cantilever. In this way, an entirely printed motion sensor is produced on a standard fabric. The motion sensor was initially tested on an electromechanical shaker rig at a low frequency range to examine the linearity and the sensitivity of each design. Then, these sensors were individually attached to a moving human forearm to evaluate more representative results. A commercial accelerometer (Microstrain G-link) was mounted alongside for comparison. The printed sensors have a similar motion response to the commercial accelerometer, demonstrating the potential of a printed smart fabric motion sensor for use in intelligent clothing applications.

Nanoporous Pirani sensor based on anodic aluminum oxide

Science.gov (United States)

Jeon, Gwang-Jae; Kim, Woo Young; Shim, Hyun Bin; Lee, Hee Chul

2016-09-01

A nanoporous Pirani sensor based on anodic aluminum oxide (AAO) is proposed, and the quantitative relationship between the performance of the sensor and the porosity of the AAO membrane is characterized with a theoretical model. The proposed Pirani sensor is composed of a metallic resistor on a suspended nanoporous membrane, which simultaneously serves as the sensing area and the supporting structure. The AAO membrane has numerous vertically-tufted nanopores, resulting in a lower measurable pressure limit due to both the increased effective sensing area and the decreased effective thermal loss through the supporting structure. Additionally, the suspended AAO membrane structure, with its outer periphery anchored to the substrate, known as a closed-type design, is demonstrated using nanopores of AAO as an etch hole without a bulk micromachining process used on the substrate. In a CMOS-compatible process, a 200 μm × 200 μm nanoporous Pirani sensor with porosity of 25% was capable of measuring the pressure from 0.1 mTorr to 760 Torr. With adjustment of the porosity of the AAO, the measurable range could be extended toward lower pressures of more than one decade compared to a non-porous membrane with an identical footprint.

Influence of surface oxidation on ion dynamics and capacitance in porous and nonporous carbon electrodes

Energy Technology Data Exchange (ETDEWEB)

Dyatkin, Boris [Drexel Univ., Philadelphia, PA (United States); Zhang, Yu [Vanderbilt Univ., Nashville, TN (United States); Mamontov, Eugene [Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States); Kolesnikov, Alexander I. [Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States); Cheng, Yongqiang [Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States); Meyer, III, Harry M. [Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States); Cummings, Peter T. [Vanderbilt Univ., Nashville, TN (United States); Gogotsi, Yury G. [Drexel Univ., Philadelphia, PA (United States)

2016-04-07

Here, we investigate the influence of surface chemistry and ion confinement on capacitance and electrosorption dynamics of room-temperature ionic liquids (RTILs) in supercapacitors. Using air oxidation and vacuum annealing, we produced defunctionalized and oxygen-rich surfaces of carbide-derived carbons (CDCs) and graphene nanoplatelets (GNPs). While oxidized surfaces of porous CDCs improve capacitance and rate handling abilities of ions, defunctionalized nonporous GNPs improve charge storage densities on planar electrodes. Quasi-elastic neutron scattering (QENS) and inelastic neutron scattering (INS) probed the structure, dynamics, and orientation of RTIL ions confined in divergently functionalized pores. Oxidized, ionophilic surfaces draw ions closer to pore surfaces and enhance potential-driven ion transport during electrosorption. Molecular dynamics (MD) simulations corroborated experimental data and demonstrated the significance of surface functional groups on ion orientations, accumulation densities, and capacitance.

A novel input-parasitic compensation technique for a nanopore-based CMOS DNA detection sensor

Science.gov (United States)

Kim, Jungsuk

2016-12-01

This paper presents a novel input-parasitic compensation (IPC) technique for a nanopore-based complementary metal-oxide-semiconductor (CMOS) DNA detection sensor. A resistive-feedback transimpedance amplifier is typically adopted as the headstage of a DNA detection sensor to amplify the minute ionic currents generated from a nanopore and convert them to a readable voltage range for digitization. But, parasitic capacitances arising from the headstage input and the nanopore often cause headstage saturation during nanopore sensing, thereby resulting in significant DNA data loss. To compensate for the unwanted saturation, in this work, we propose an area-efficient and automated IPC technique, customized for a low-noise DNA detection sensor, fabricated using a 0.35- μm CMOS process; we demonstrated this prototype in a benchtop test using an α-hemolysin ( α-HL) protein nanopore.

Three-axial force sensor with capacitive read-out using a differential relaxation oscillator

NARCIS (Netherlands)

Brookhuis, Robert Anton; Wiegerink, Remco J.; Lammerink, Theodorus S.J.; Krijnen, Gijsbertus J.M.

2013-01-01

A silicon three-axis force sensor is designed and realized to be used for measurement of the interaction force between a human finger and the environment. To detect the force components, a capacitive read-out system using a novel relaxation oscillator has been developed with an output frequency

Two-Dimensional Micro-/Nanoradian Angle Generator with High Resolution and Repeatability Based on Piezo-Driven Double-Axis Flexure Hinge and Three Capacitive Sensors

Directory of Open Access Journals (Sweden)

Xinran Tan

2017-11-01

Full Text Available This study presents a two-dimensional micro-/nanoradian angle generator (2D-MNAG that achieves high angular displacement resolution and repeatability using a piezo-driven flexure hinge for two-dimensional deflections and three capacitive sensors for output angle monitoring and feedback control. The principal error of the capacitive sensor for precision microangle measurement is analyzed and compensated for; so as to achieve a high angle output resolution of 10 nrad (0.002 arcsec and positioning repeatability of 120 nrad (0.024 arcsec over a large angular range of ±4363 μrad (±900 arcsec for the 2D-MNAG. The impact of each error component, together with the synthetic error of the 2D-MNAG after principal error compensation are determined using Monte Carlo simulation for further improvement of the 2D-MNAG.

Capacitance Regression Modelling Analysis on Latex from Selected Rubber Tree Clones

International Nuclear Information System (INIS)

Rosli, A D; Baharudin, R; Hashim, H; Khairuzzaman, N A; Mohd Sampian, A F; Abdullah, N E; Kamaru'zzaman, M; Sulaiman, M S

2015-01-01

This paper investigates the capacitance regression modelling performance of latex for various rubber tree clones, namely clone 2002, 2008, 2014 and 3001. Conventionally, the rubber tree clones identification are based on observation towards tree features such as shape of leaf, trunk, branching habit and pattern of seeds texture. The former method requires expert persons and very time-consuming. Currently, there is no sensing device based on electrical properties that can be employed to measure different clones from latex samples. Hence, with a hypothesis that the dielectric constant of each clone varies, this paper discusses the development of a capacitance sensor via Capacitance Comparison Bridge (known as capacitance sensor) to measure an output voltage of different latex samples. The proposed sensor is initially tested with 30ml of latex sample prior to gradually addition of dilution water. The output voltage and capacitance obtained from the test are recorded and analyzed using Simple Linear Regression (SLR) model. This work outcome infers that latex clone of 2002 has produced the highest and reliable linear regression line with determination coefficient of 91.24%. In addition, the study also found that the capacitive elements in latex samples deteriorate if it is diluted with higher volume of water. (paper)

Design and standalone characterisation of a capacitively coupled HV-CMOS sensor chip for the CLIC vertex detector

Science.gov (United States)

Kremastiotis, I.; Ballabriga, R.; Campbell, M.; Dannheim, D.; Fiergolski, A.; Hynds, D.; Kulis, S.; Peric, I.

2017-09-01

The concept of capacitive coupling between sensors and readout chips is under study for the vertex detector at the proposed high-energy CLIC electron positron collider. The CLICpix Capacitively Coupled Pixel Detector (C3PD) is an active High-Voltage CMOS sensor, designed to be capacitively coupled to the CLICpix2 readout chip. The chip is implemented in a commercial 180 nm HV-CMOS process and contains a matrix of 128×128 square pixels with 25μm pitch. First prototypes have been produced with a standard resistivity of ~20 Ωcm for the substrate and tested in standalone mode. The results show a rise time of ~20 ns, charge gain of 190 mV/ke- and ~40 e- RMS noise for a power consumption of 4.8μW/pixel. The main design aspects, as well as standalone measurement results, are presented.

Impedance Characterization of the Capacitive field-Effect pH-Sensor Based on a thin-Layer Hafnium Oxide Formed by Atomic Layer Deposition

Directory of Open Access Journals (Sweden)

Michael LEE

2014-05-01

Full Text Available As a sensing element, silicon dioxide (SiO2 has been applied within ion-sensitive field effect transistors (ISFET. However, a requirement of increasing pH-sensitivity and stability has observed an increased number of insulating materials that obtain high-k gate being applied as FETs. The increased high-k gate reduces the required metal oxide layer and, thus, the fabrication of thin hafnium oxide (HfO2 layers by atomic layer deposition (ALD has grown with interest in recent years. This metal oxide presents advantageous characteristics that can be beneficial for the advancements within miniaturization of complementary metal oxide semiconductor (CMOS technology. In this article, we describe a process for fabrication of HfO2 based on ALD by applying water (H2O as the oxygen precursor. As a first, electrochemical impedance spectroscopy (EIS measurements were performed with varying pH (2-10 to demonstrate the sensitivity of HfO2 as a potential pH sensing material. The Nyquist plot demonstrates a high clear shift of the polarization resistance (Rp between pH 6-10 (R2 = 0.9986, Y = 3,054X + 12,100. At acidic conditions (between pH 2-10, the Rp change was small due to the unmodified oxide gate (R2 = 0.9655, Y = 2,104X + 4,250. These preliminary results demonstrate the HfO2 substrate functioned within basic to neutral conditions and establishes a great potential for applying HfO2 as a dielectric material for future pH measuring FET sensors.

Avaliação de sensor capacitivo para o monitoramento do teor de água do solo Evaluation of a capacitance sensor for monitoring soil water content

Directory of Open Access Journals (Sweden)

Tadeu M. L. Cruz

2010-02-01

Full Text Available Este trabalho teve como objetivo avaliar sensores capacitivos desenvolvidos para monitorar o teor de água do solo. Os sensores foram submetidos a testes para avaliar o efeito da temperatura, o tempo de resposta, obter a equação de calibração e determinar a sua sensibilidade. Foram analisados em diferentes situações (solo, água e ar e temperaturas (25 ºC; 20 ºC; 15 ºC; 10 ºC; 5º C e 0 ºC. A calibração foi efetuada com um dos sensores capacitivos instalado em uma coluna de solo (indeformada contida em um tubo de PVC (0,015066 m³ e suspensa em um dos lados de uma balança de braços. Na outra extremidade da balança, havia uma célula de carga conectada a um sistema de aquisição de dados. Os resultados indicaram redução na frequência do sensor capacitivo com o aumento da temperatura. O sensor capacitivo apresentou alta velocidade de resposta (menos de um segundo ao imergi-lo na água e às variações da quantidade de água na amostra de solo e detectou as mudanças de perda de água pela coluna de solo no decorrer deste experimento, apresentando maior sensibilidade à medida que se diminui o conteúdo de água no solo. Portanto, o sensor capacitivo pode ser utilizado para determinar o teor de água do solo de forma adequada.This paper aims to evaluate a capacitance sensor for monitoring soil water content. Capacitance sensors were tested to evaluate the effect of temperature and response time, and to obtain the calibration equation and their sensitivity. Sensors were placed in different environments (soil, water and air and temperatures (25 ºC, 20 ºC, 15 ºC, 10 ºC, 5 ºC and 0 ºC. The calibration was performed with one of the capacitance sensors installed in a PVC column containing 0.015066 m³of undisturbed soil and hanged on one side of a scale with a load cell connected to a data acquisition board on the other side. Results showed reductions in the frequency response of the capacitance sensor with increasing

Screen printing of a capacitive cantilever-based motion sensor on fabric using a novel sacrificial layer process for smart fabric applications

International Nuclear Information System (INIS)

Wei, Yang; Torah, Russel; Yang, Kai; Beeby, Steve; Tudor, John

2013-01-01

Free-standing cantilevers have been fabricated by screen printing sacrificial and structural layers onto a standard polyester cotton fabric. By printing additional conductive layers, a complete capacitive motion sensor on fabric using only screen printing has been fabricated. This type of free-standing structure cannot currently be fabricated using conventional fabric manufacturing processes. In addition, compared to conventional smart fabric fabrication processes (e.g. weaving and knitting), screen printing offers the advantages of geometric design flexibility and the ability to simultaneously print multiple devices of the same or different designs. Furthermore, a range of active inks exists from the printed electronics industry which can potentially be applied to create many types of smart fabric. Four cantilevers with different lengths have been printed on fabric using a five-layer structure with a sacrificial material underneath the cantilever. The sacrificial layer is subsequently removed at 160 °C for 30 min to achieve a freestanding cantilever above the fabric. Two silver electrodes, one on top of the cantilever and the other on top of the fabric, are used to capacitively detect the movement of the cantilever. In this way, an entirely printed motion sensor is produced on a standard fabric. The motion sensor was initially tested on an electromechanical shaker rig at a low frequency range to examine the linearity and the sensitivity of each design. Then, these sensors were individually attached to a moving human forearm to evaluate more representative results. A commercial accelerometer (Microstrain G-link) was mounted alongside for comparison. The printed sensors have a similar motion response to the commercial accelerometer, demonstrating the potential of a printed smart fabric motion sensor for use in intelligent clothing applications. (paper)

Graphene and maghemite composites based supercapacitors delivering high volumetric capacitance and extraordinary cycling stability

International Nuclear Information System (INIS)

Zhang, Haitao; Zhang, Xiong; Lin, He; Wang, Kai; Sun, Xianzhong; Xu, Nansheng; Li, Chen; Ma, Yanwei

2015-01-01

Metal oxides (like MnO 2 , Fe 2 O 3 , and Co 3 O 4 , etc) based supercapacitors have disadvantages, such as low volumetric capacitance for thick-film electrodes, or short cycling life because a Faradaic process involves chemical changes of state of the reactant species. In the present work, we report that supercapacitors based on reduced graphene oxide and maghemite (γ-Fe 2 O 3 ) composites (GγM) exhibit superior performance. GγM electrodes with average electrode thickness up to ∼60 μm have a high volumetric capacitance of 230 F cm −3 , together with an outstanding electrode package density of 1.44 g cm −3 . Particularly, the GγM electrodes have excellent cycling performance of ∼90% capacitance retention over 100,000 galvanostatic charge–discharge cycles or voltage floating at 0.9 V for 300 h. No detectable change in phase and an effective inhibition of γ-Fe 2 O 3 refinement after cycle-life test are confirmed by X-ray diffraction and transmission electron microscopy

Wheel-Based Ice Sensors for Road Vehicles

Science.gov (United States)

Arndt, G. Dickey; Fink, Patrick W.; Ngo, Phong H.; Carl, James R.

2011-01-01

Wheel-based sensors for detection of ice on roads and approximate measurement of the thickness of the ice are under development. These sensors could be used to alert drivers to hazardous local icing conditions in real time. In addition, local ice-thickness measurements by these sensors could serve as guidance for the minimum amount of sand and salt required to be dispensed locally onto road surfaces to ensure safety, thereby helping road crews to utilize their total supplies of sand and salt more efficiently. Like some aircraft wing-surface ice sensors described in a number of previous NASA Tech Briefs articles, the wheelbased ice sensors are based, variously, on measurements of changes in capacitance and/or in radio-frequency impedance as affected by ice on surfaces. In the case of ice on road surfaces, the measurable changes in capacitance and/or impedance are attributable to differences among the electric permittivities of air, ice, water, concrete, and soil. In addition, a related phenomenon that can be useful for distinguishing between ice and water is a specific transition in the permittivity of ice at a temperature- dependent frequency. This feature also provides a continuous calibration of the sensor to allow for changing road conditions. Several configurations of wheel-based ice sensors are under consideration. For example, in a simple two-electrode capacitor configuration, one of the electrodes would be a circumferential electrode within a tire, and the ground would be used as the second electrode. Optionally, the steel belts that are already standard parts of many tires could be used as the circumferential electrodes. In another example (see figure), multiple electrodes would be embedded in rubber between the steel belt and the outer tire surface. These electrodes would be excited in alternating polarities at one or more suitable audio or radio frequencies to provide nearly continuous monitoring of the road surface under the tire. In still another

Long-Term Stability of Oxide Nanowire Sensors via Heavily Doped Oxide Contact.

Science.gov (United States)

Zeng, Hao; Takahashi, Tsunaki; Kanai, Masaki; Zhang, Guozhu; He, Yong; Nagashima, Kazuki; Yanagida, Takeshi

2017-12-22

Long-term stability of a chemical sensor is an essential quality for long-term collection of data related to exhaled breath, environmental air, and other sources in the Internet of things (IoT) era. Although an oxide nanowire sensor has shown great potential as a chemical sensor, the long-term stability of sensitivity has not been realized yet due to electrical degradation under harsh sensing conditions. Here, we report a rational concept to accomplish long-term electrical stability of metal oxide nanowire sensors via introduction of a heavily doped metal oxide contact layer. Antimony-doped SnO 2 (ATO) contacts on SnO 2 nanowires show much more stable and lower electrical contact resistance than conventional Ti contacts for high temperature (200 °C) conditions, which are required to operate chemical sensors. The stable and low contact resistance of ATO was confirmed for at least 1960 h under 200 °C in open air. This heavily doped oxide contact enables us to realize the long-term stability of SnO 2 nanowire sensors while maintaining the sensitivity for both NO 2 gas and light (photo) detections. The applicability of our method is confirmed for sensors on a flexible polyethylene naphthalate (PEN) substrate. Since the proposed fundamental concept can be applied to various oxide nanostructures, it will give a foundation for designing long-term stable oxide nanomaterial-based IoT sensors.

Graphene oxide - Polyvinyl alcohol nanocomposite based electrode material for supercapacitors

Science.gov (United States)

Pawar, Pranav Bhagwan; Shukla, Shobha; Saxena, Sumit

2016-07-01

Supercapacitors are high capacitive energy storage devices and find applications where rapid bursts of power are required. Thus materials offering high specific capacitance are of fundamental interest in development of these electrochemical devices. Graphene oxide based nanocomposites are mechanically robust and have interesting electronic properties. These form potential electrode materials efficient for charge storage in supercapacitors. In this perspective, we investigate low cost graphene oxide based nanocomposites as electrode material for supercapacitor. Nanocomposites of graphene oxide and polyvinyl alcohol were synthesized in solution phase by integrating graphene oxide as filler in polyvinyl alcohol matrix. Structural and optical characterizations suggest the formation of graphene oxide and polyvinyl alcohol nanocomposites. These nanocomposites were found to have high specific capacitance, were cyclable, ecofriendly and economical. Our studies suggest that nanocomposites prepared by adding 0.5% wt/wt of graphene oxide in polyvinyl alcohol can be used an efficient electrode material for supercapacitors.

Low temperature co-fired ceramic packaging of CMOS capacitive sensor chip towards cell viability monitoring

Directory of Open Access Journals (Sweden)

Niina Halonen

2016-11-01

Full Text Available Cell viability monitoring is an important part of biosafety evaluation for the detection of toxic effects on cells caused by nanomaterials, preferably by label-free, noninvasive, fast, and cost effective methods. These requirements can be met by monitoring cell viability with a capacitance-sensing integrated circuit (IC microchip. The capacitance provides a measurement of the surface attachment of adherent cells as an indication of their health status. However, the moist, warm, and corrosive biological environment requires reliable packaging of the sensor chip. In this work, a second generation of low temperature co-fired ceramic (LTCC technology was combined with flip-chip bonding to provide a durable package compatible with cell culture. The LTCC-packaged sensor chip was integrated with a printed circuit board, data acquisition device, and measurement-controlling software. The packaged sensor chip functioned well in the presence of cell medium and cells, with output voltages depending on the medium above the capacitors. Moreover, the manufacturing of microfluidic channels in the LTCC package was demonstrated.

YSZ-based sensor using Cr-Fe-based spinel-oxide electrodes for selective detection of CO.

Science.gov (United States)

Anggraini, Sri Ayu; Fujio, Yuki; Ikeda, Hiroshi; Miura, Norio

2017-08-22

A selective carbon monoxide (CO) sensor was developed by the use of both of CuCrFeO 4 and CoCrFeO 4 as the sensing electrode (SE) for yttria-stabilized zirconia (YSZ)-based potentiometric sensor. The sensing-characteristic examinations of the YSZ-based sensors using each of spinel oxides as the single-SE sensor showed that CuCrFeO 4 -SE had the ability to detect CO, hydrocarbons and NO x gases, while CoCrFeO 4 -SE was sensitive to hydrocarbons and NO x gases. Thus, when both SEs were paired as a combined-SEs sensor, the resulting sensor could generate a selective response to CO at 450 °C under humid conditions. The sensor was also capable of detecting CO in the concentration range of 20-700 ppm. Its sensing mechanism that was examined via polarization-curve measurements was confirmed to be based on mixed-potential model. The CO response generated by the combined-SEs sensor was unaffected by the change of water vapor concentration in the range of 1.3-11.5 vol% H 2 O. Additionally, the sensing performance was stable during 13 days tested. Copyright © 2017 Elsevier B.V. All rights reserved.

Fabrication of a capacitive relative humidity sensor using aluminum thin films deposited on etched printed circuit board

Directory of Open Access Journals (Sweden)

Lee Jacqueline Ann L.

2016-01-01

Full Text Available A capacitive humidity-sensing device was created by thermal evaporation of 99.999% aluminum. The substrate used for the coating was etched double-sided printed circuit board. The etched printed circuit board serves as the dielectric of the capacitor while the aluminum thin films deposited on either side serve as the plates of the capacitor. The capacitance was measured before and after exposure to humidity. The device was then calibrated by comparing the readings of capacitance with that of the relative humidity sensor of the Vernier LabQuest2. It was found that there is a linear relationship between the capacitance and relative humidity given by the equation C=1.418RH+29.139 where C is the capacitance and RH is the relative humidity. The surface of the aluminum films is porous and it is through these pores that water is adsorbed and capillary condensation occurs, thereby causing the capacitance to change upon exposure to humidity.

Programmable differential capacitance-to-voltage converter for MEMS accelerometers

Science.gov (United States)

Royo, G.; Sánchez-Azqueta, C.; Gimeno, C.; Aldea, C.; Celma, S.

2017-05-01

Capacitive MEMS sensors exhibit an excellent noise performance, high sensitivity and low power consumption. They offer a huge range of applications, being the accelerometer one of its main uses. In this work, we present the design of a capacitance-to-voltage converter in CMOS technology to measure the acceleration from the capacitance variations. It is based on a low-power, fully-differential transimpedance amplifier with low input impedance and a very low input noise.

Iridium Oxide pH Sensor Based on Stainless Steel Wire for pH Mapping on Metal Surface

Science.gov (United States)

Shahrestani, S.; Ismail, M. C.; Kakooei, S.; Beheshti, M.; Zabihiazadboni, M.; Zavareh, M. A.

2018-03-01

A simple technique to fabricate the iridium oxide pH sensor is useful in several applications such as medical, food processing and engineering material where it is able to detect the changes of pH. Generally, the fabrication technique can be classified into three types: electro-deposition iridium oxide film (EIrOF), activated iridium oxide film (AIROF) and sputtering iridium oxide film (SIROF). This study focuses on fabricating electrode, calibration and test. Electro-deposition iridium oxide film is a simple and effective method of fabricating this kind of sensor via cyclic voltammetry process. The iridium oxide thick film was successfully electrodeposited on the surface of stainless steel wire with 500 cycles of sweep potential. A further analysis under FESEM shows detailed image of iridium oxide film which has cauliflower-liked microstructure. EDX analysis shows the highest element present are iridium and oxygen which concluded that the process is successful. The iridium oxide based pH sensor has shown a good performance in comparison to conventional glass pH sensor when it is being calibrated in buffer solutions with 2, 4, 7 and 9 pH values. The iridium oxide pH sensor is specifically designed to measure the pH on the surface of metal plate.

Capacitive sensing of droplets for microfluidic devices based on thermocapillary actuation.

Science.gov (United States)

Chen, Jian Z; Darhuber, Anton A; Troian, Sandra M; Wagner, Sigurd

2004-10-01

The design and performance of a miniaturized coplanar capacitive sensor is presented whose electrode arrays can also function as resistive microheaters for thermocapillary actuation of liquid films and droplets. Optimal compromise between large capacitive signal and high spatial resolution is obtained for electrode widths comparable to the liquid film thickness measured, in agreement with supporting numerical simulations which include mutual capacitance effects. An interdigitated, variable width design, allowing for wider central electrodes, increases the capacitive signal for liquid structures with non-uniform height profiles. The capacitive resolution and time response of the current design is approximately 0.03 pF and 10 ms, respectively, which makes possible a number of sensing functions for nanoliter droplets. These include detection of droplet position, size, composition or percentage water uptake for hygroscopic liquids. Its rapid response time allows measurements of the rate of mass loss in evaporating droplets.

Highly Sensitive and Selective Sensor Chips with Graphene-Oxide Linking Layer

DEFF Research Database (Denmark)

Stebunov, Yury V.; Aftenieva, Olga A.; Arsenin, Aleksey V.

2015-01-01

sensor chip for SPR biosensors based on graphene-oxide linking layers. The biosensing assay model was based on a graphene oxide film containing streptavidin. The proposed sensor chip has three times higher sensitivity than the carboxymethylated dextran surface of a commercial sensor chip. Moreover...

One-step electroplating porous graphene oxide electrodes of supercapacitors for ultrahigh capacitance and energy density.

Science.gov (United States)

Wang, Yongjie; Zhu, Jiaqi

2015-02-06

An electroplating method was used for the first time to synthesize 3D porous graphene oxide (PGO) architectures, exhibiting ultrahigh capacitance and energy density as electrodes of supercapacitors. Scanning electron microscopy illustrated the porous structures which promoted the stability and alleviated the stacking of the graphene oxide layers. As investigated in a three-electrode supercapacitor cell, PGO electrodes exhibited the maximum capacitance and energy of 973 F · g(-1) and 98.4 Wh · Kg(-1), which are better than current reports and comparable to batteries. At 4 A · g(-1) for high-power applications, PGO electrodes reached a capacitance, energy, and power density of 493 F · g(-1), 49.9 Wh · Kg(-1), and 1700 W · Kg(-1), and they retained ∼97.83% of capacitance after 10 000 charge/discharge processes. Furthermore, when the PGO was bent exaggeratedly, it still displayed identical properties, which is of important significance for supporting wearable devices.

Force Sensitive Handles and Capacitive Touch Sensor for Driving a Flexible Haptic-Based Immersive System

Directory of Open Access Journals (Sweden)

Umberto Cugini

2013-10-01

Full Text Available In this article, we present an approach that uses both two force sensitive handles (FSH and a flexible capacitive touch sensor (FCTS to drive a haptic-based immersive system. The immersive system has been developed as part of a multimodal interface for product design. The haptic interface consists of a strip that can be used by product designers to evaluate the quality of a 3D virtual shape by using touch, vision and hearing and, also, to interactively change the shape of the virtual object. Specifically, the user interacts with the FSH to move the virtual object and to appropriately position the haptic interface for retrieving the six degrees of freedom required for both manipulation and modification modalities. The FCTS allows the system to track the movement and position of the user’s fingers on the strip, which is used for rendering visual and sound feedback. Two evaluation experiments are described, which involve both the evaluation and the modification of a 3D shape. Results show that the use of the haptic strip for the evaluation of aesthetic shapes is effective and supports product designers in the appreciation of the aesthetic qualities of the shape.

Force sensitive handles and capacitive touch sensor for driving a flexible haptic-based immersive system.

Science.gov (United States)

Covarrubias, Mario; Bordegoni, Monica; Cugini, Umberto

2013-10-09

In this article, we present an approach that uses both two force sensitive handles (FSH) and a flexible capacitive touch sensor (FCTS) to drive a haptic-based immersive system. The immersive system has been developed as part of a multimodal interface for product design. The haptic interface consists of a strip that can be used by product designers to evaluate the quality of a 3D virtual shape by using touch, vision and hearing and, also, to interactively change the shape of the virtual object. Specifically, the user interacts with the FSH to move the virtual object and to appropriately position the haptic interface for retrieving the six degrees of freedom required for both manipulation and modification modalities. The FCTS allows the system to track the movement and position of the user's fingers on the strip, which is used for rendering visual and sound feedback. Two evaluation experiments are described, which involve both the evaluation and the modification of a 3D shape. Results show that the use of the haptic strip for the evaluation of aesthetic shapes is effective and supports product designers in the appreciation of the aesthetic qualities of the shape.

Circuit Design of Surface Acoustic Wave Based Micro Force Sensor

Directory of Open Access Journals (Sweden)

Yuanyuan Li

2014-01-01

Full Text Available Pressure sensors are commonly used in industrial production and mechanical system. However, resistance strain, piezoresistive sensor, and ceramic capacitive pressure sensors possess limitations, especially in micro force measurement. A surface acoustic wave (SAW based micro force sensor is designed in this paper, which is based on the theories of wavelet transform, SAW detection, and pierce oscillator circuits. Using lithium niobate as the basal material, a mathematical model is established to analyze the frequency, and a peripheral circuit is designed to measure the micro force. The SAW based micro force sensor is tested to show the reasonable design of detection circuit and the stability of frequency and amplitude.

Design of Helical Capacitance Sensor for Holdup Measurement in Two-Phase Stratified Flow: A Sinusoidal Function Approach

Science.gov (United States)

Lim, Lam Ghai; Pao, William K. S.; Hamid, Nor Hisham; Tang, Tong Boon

2016-01-01

A 360° twisted helical capacitance sensor was developed for holdup measurement in horizontal two-phase stratified flow. Instead of suppressing nonlinear response, the sensor was optimized in such a way that a ‘sine-like’ function was displayed on top of the linear function. This concept of design had been implemented and verified in both software and hardware. A good agreement was achieved between the finite element model of proposed design and the approximation model (pure sinusoidal function), with a maximum difference of ±1.2%. In addition, the design parameters of the sensor were analysed and investigated. It was found that the error in symmetry of the sinusoidal function could be minimized by adjusting the pitch of helix. The experiments of air-water and oil-water stratified flows were carried out and validated the sinusoidal relationship with a maximum difference of ±1.2% and ±1.3% for the range of water holdup from 0.15 to 0.85. The proposed design concept therefore may pose a promising alternative for the optimization of capacitance sensor design. PMID:27384567

Design of Helical Capacitance Sensor for Holdup Measurement in Two-Phase Stratified Flow: A Sinusoidal Function Approach

Directory of Open Access Journals (Sweden)

Lam Ghai Lim

2016-07-01

Full Text Available A 360° twisted helical capacitance sensor was developed for holdup measurement in horizontal two-phase stratified flow. Instead of suppressing nonlinear response, the sensor was optimized in such a way that a ‘sine-like’ function was displayed on top of the linear function. This concept of design had been implemented and verified in both software and hardware. A good agreement was achieved between the finite element model of proposed design and the approximation model (pure sinusoidal function, with a maximum difference of ±1.2%. In addition, the design parameters of the sensor were analysed and investigated. It was found that the error in symmetry of the sinusoidal function could be minimized by adjusting the pitch of helix. The experiments of air-water and oil-water stratified flows were carried out and validated the sinusoidal relationship with a maximum difference of ±1.2% and ±1.3% for the range of water holdup from 0.15 to 0.85. The proposed design concept therefore may pose a promising alternative for the optimization of capacitance sensor design.

Design of Helical Capacitance Sensor for Holdup Measurement in Two-Phase Stratified Flow: A Sinusoidal Function Approach.

Science.gov (United States)

Lim, Lam Ghai; Pao, William K S; Hamid, Nor Hisham; Tang, Tong Boon

2016-07-04

A 360° twisted helical capacitance sensor was developed for holdup measurement in horizontal two-phase stratified flow. Instead of suppressing nonlinear response, the sensor was optimized in such a way that a 'sine-like' function was displayed on top of the linear function. This concept of design had been implemented and verified in both software and hardware. A good agreement was achieved between the finite element model of proposed design and the approximation model (pure sinusoidal function), with a maximum difference of ±1.2%. In addition, the design parameters of the sensor were analysed and investigated. It was found that the error in symmetry of the sinusoidal function could be minimized by adjusting the pitch of helix. The experiments of air-water and oil-water stratified flows were carried out and validated the sinusoidal relationship with a maximum difference of ±1.2% and ±1.3% for the range of water holdup from 0.15 to 0.85. The proposed design concept therefore may pose a promising alternative for the optimization of capacitance sensor design.

Three-dimensional activated reduced graphene oxide nanocup/nickel aluminum layered double hydroxides composite with super high electrochemical and capacitance performances

International Nuclear Information System (INIS)

Lin, Yan; Ruiyi, Li; Zaijun, Li; Junkang, Liu; Yinjun, Fang; Guangli, Wang; Zhiguo, Gu

2013-01-01

The paper reported a three-dimensional activated reduced graphene oxide nanocup/nickel aluminum layered double hydroxides composite (3D-ARGON/NiAl-LDH) with super high electrochemical and capacitance performances. Graphene oxide was reduced by hydrazine in ammonia medium to form three-dimensional reduced graphene oxide nanocup using polystyrene colloidal particle as sacrificial template. The nanocup was then activated by the alkali corrosion and thermal annealing. The 3D-ARGON/NiAl-LDH was finally fabricated by the hydrothermal synthesis via in situ growth of ultrathin NiAl-LDH nanoflakes on the 3D-ARGON in an ethanol medium. The study demonstrated that the composite offers special 3D architecture with a macropore on the rim of a cup and large mesoporous structure on the wall of a cup, which will greatly boost the electron transfer and mass transport during the faradaic redox reaction, and displays excellent electrochemical and capactance performances, including high specific capacitance and rate capability, good charge/discharge stability and long-term cycling life. Its maximum specific capacitance was found to be 2712.7 F g −1 at the current density of 1 A g −1 , which is more than 7-fold that of pure NiAl-LDH, 3-fold that of common reduced graphene oxide/NiAl-LDH and 1.8-fold that of two-dimensional activated reduced graphene oxide/NiAl-LDH. The specific capacitance can remain 1174 F g −1 when the current density increases up to 50 A g −1 . After 5000 cycles at the current density of 30 A g −1 , the capacitance can keep at least 98.9%. This study provides a promising approach for the design and synthesis of graphene-based materials with largely enhanced supercapacitor behaviors, which can be potentially applied in energy storage/conversion devices

Metal oxide nanostructures as gas sensing devices

CERN Document Server

Eranna, G

2016-01-01

Metal Oxide Nanostructures as Gas Sensing Devices explores the development of an integrated micro gas sensor that is based on advanced metal oxide nanostructures and is compatible with modern semiconductor fabrication technology. This sensor can then be used to create a compact, low-power, handheld device for analyzing air ambience. The book first covers current gas sensing tools and discusses the necessity for miniaturized sensors. It then focuses on the materials, devices, and techniques used for gas sensing applications, such as resistance and capacitance variations. The author addresses the issues of sensitivity, concentration, and temperature dependency as well as the response and recovery times crucial for sensors. He also presents techniques for synthesizing different metal oxides, particularly those with nanodimensional structures. The text goes on to highlight the gas sensing properties of many nanostructured metal oxides, from aluminum and cerium to iron and titanium to zinc and zirconium. The final...

A pH Sensor Based on a Stainless Steel Electrode Electrodeposited with Iridium Oxide

Science.gov (United States)

Martinez, C. C. M.; Madrid, R. E.; Felice, C. J.

2009-01-01

A simple procedure to make an iridium oxide (IrO[subscript 2]) electrodeposited pH sensor, that can be used in a chemical, biomedical, or materials laboratory, is presented here. Some exercises, based on this sensor, that can be used to teach important concepts in the field of biomedical, biochemical, tissue, or materials engineering, are also…

Capacitive MEMS-based sensors : thermo-mechanical stability and charge trapping

NARCIS (Netherlands)

van Essen, M.C.

2009-01-01

Micro-Electro Mechanical Systems (MEMS) are generally characterized as miniaturized systems with electrostatically driven moving parts. In many cases, the electrodes are capacitively coupled. This basic scheme allows for a plethora of specifications and functionality. This technology has presently

Transparent Flexible Active Faraday Cage Enables In Vivo Capacitance Measurement in Assembled Microsensor.

Science.gov (United States)

Ahmadi, Mahdi; Rajamani, Rajesh; Sezen, Serdar

2017-10-01

Capacitive micro-sensors such as accelerometers, gyroscopes and pressure sensors are increasingly used in the modern electronic world. However, the in vivo use of capacitive sensing for measurement of pressure or other variables inside a human body suffers from significant errors due to stray capacitance. This paper proposes a solution consisting of a transparent thin flexible Faraday cage that surrounds the sensor. By supplying the active sensing voltage simultaneously to the deformable electrode of the capacitive sensor and to the Faraday cage, the stray capacitance during in vivo measurements can be largely eliminated. Due to the transparency of the Faraday cage, the top and bottom portions of a capacitive sensor can be accurately aligned and assembled together. Experimental results presented in the paper show that stray capacitance is reduced by a factor of 10 by the Faraday cage, when the sensor is subjected to a full immersion in water.

A Self-Powered and Autonomous Fringing Field Capacitive Sensor Integrated into a Micro Sprinkler Spinner to Measure Soil Water Content.

Science.gov (United States)

da Costa, Eduardo Ferreira; de Oliveira, Nestor E; Morais, Flávio J O; Carvalhaes-Dias, Pedro; Duarte, Luis Fernando C; Cabot, Andreu; Siqueira Dias, J A

2017-03-12

We present here the design and fabrication of a self-powered and autonomous fringing field capacitive sensor to measure soil water content. The sensor is manufactured using a conventional printed circuit board and includes a porous ceramic. To read the sensor, we use a circuit that includes a 10 kHz triangle wave generator, an AC amplifier, a precision rectifier and a microcontroller. In terms of performance, the sensor's capacitance (measured in a laboratory prototype) increases up to 5% when the volumetric water content of the porous ceramic changed from 3% to 36%, resulting in a sensitivity of S = 15.5 pF per unity change. Repeatability tests for capacitance measurement showed that the θ v sensor's root mean square error is 0.13%. The average current consumption of the system (sensor and signal conditioning circuit) is less than 1.5 μ A, which demonstrates its suitability for being powered by energy harvesting systems. We developed a complete irrigation control system that integrates the sensor, an energy harvesting module composed of a microgenerator installed on the top of a micro sprinkler spinner, and a DC/DC converter circuit that charges a 1 F supercapacitor. The energy harvesting module operates only when the micro sprinkler spinner is irrigating the soil, and the supercapacitor is fully charged to 5 V in about 3 h during the first irrigation. After the first irrigation, with the supercap fully charged, the system can operate powered only by the supercapacitor for approximately 23 days, without any energy being harvested.

A robust parasitic-insensitive successive approximation capacitance-to-digital converter

KAUST Repository

Omran, Hesham

2014-09-01

In this paper, we present a capacitive sensor digital interface circuit using true capacitance-domain successive approximation that is independent of supply voltage. Robust operation is achieved by using a charge amplifier stage and multiple comparison technique. The interface circuit is insensitive to parasitic capacitances, offset voltages, and charge injection, and is not prone to noise coupling. The proposed design achieves very low temperature sensitivity of 25ppm/oC. A coarse-fine programmable capacitance array allows digitizing a wide capacitance range of 16pF with 12.5-bit quantization limited resolution in a compact area of 0.07mm2. The fabricated prototype is experimentally verified using on-chip sensor and off-chip MEMS capacitive pressure sensor. © 2014 IEEE.

A robust parasitic-insensitive successive approximation capacitance-to-digital converter

KAUST Repository

Omran, Hesham; Arsalan, Muhammad; Salama, Khaled N.

2014-01-01

In this paper, we present a capacitive sensor digital interface circuit using true capacitance-domain successive approximation that is independent of supply voltage. Robust operation is achieved by using a charge amplifier stage and multiple comparison technique. The interface circuit is insensitive to parasitic capacitances, offset voltages, and charge injection, and is not prone to noise coupling. The proposed design achieves very low temperature sensitivity of 25ppm/oC. A coarse-fine programmable capacitance array allows digitizing a wide capacitance range of 16pF with 12.5-bit quantization limited resolution in a compact area of 0.07mm2. The fabricated prototype is experimentally verified using on-chip sensor and off-chip MEMS capacitive pressure sensor. © 2014 IEEE.

A 35fJ/Step differential successive approximation capacitive sensor readout circuit with quasi-dynamic operation

KAUST Repository

Omran, Hesham; Alhoshany, Abdulaziz; Alahmadi, Hamzah; Salama, Khaled N.

2016-01-01

We propose a successive-approximation capacitive sensor readout circuit that achieves 35fJ/Step energy efficiency FoM, which represents 4× improvement over the state-of-the-art. A fully differential architecture is employed to provide robustness

One-step electroplating porous graphene oxide electrodes of supercapacitors for ultrahigh capacitance and energy density

International Nuclear Information System (INIS)

Wang, Yongjie; Zhu, Jiaqi

2015-01-01

An electroplating method was used for the first time to synthesize 3D porous graphene oxide (PGO) architectures, exhibiting ultrahigh capacitance and energy density as electrodes of supercapacitors. Scanning electron microscopy illustrated the porous structures which promoted the stability and alleviated the stacking of the graphene oxide layers. As investigated in a three-electrode supercapacitor cell, PGO electrodes exhibited the maximum capacitance and energy of 973 F · g −1 and 98.4 Wh · Kg −1 , which are better than current reports and comparable to batteries. At 4 A · g −1 for high-power applications, PGO electrodes reached a capacitance, energy, and power density of 493 F · g −1 , 49.9 Wh · Kg −1 , and 1700 W · Kg −1 , and they retained ∼97.83% of capacitance after 10 000 charge/discharge processes. Furthermore, when the PGO was bent exaggeratedly, it still displayed identical properties, which is of important significance for supporting wearable devices. (paper)

A 3D Faraday Shield for Interdigitated Dielectrometry Sensors and Its Effect on Capacitance

Directory of Open Access Journals (Sweden)

Alex Risos

2016-12-01

Full Text Available Interdigitated dielectrometry sensors (IDS are capacitive sensors investigated to precisely measure the relative permittivity ( ϵ r of insulating liquids. Such liquids used in the power industry exhibit a change in ϵ r as they degrade. The IDS ability to measure ϵ r in-situ can potentially reduce maintenance, increase grid stability and improve safety. Noise from external electric field sources is a prominent issue with IDS. This paper investigates the novelty of applying a Faraday cage onto an IDS as a 3D shield to reduce this noise. This alters the spatially distributed electric field of an IDS affecting its sensing properties. Therefore, dependency of the sensor’s signal with the distance to a shield above the IDS electrodes has been investigated experimentally and theoretically via a Green’s function calculation and FEM. A criteria of the shield’s distance s = s 0 has been defined as the distance which gives a capacitance for the IDS equal to 1 − e − 2 = 86.5 % of its unshielded value. Theoretical calculations using a simplified geometry gave a constant value for s 0 / λ = 1.65, where λ is the IDS wavelength. In the experiment, values for s 0 were found to be lower than predicted as from theory and the ratio s 0 / λ variable. This was analyzed in detail and it was found to be resulting from the specific spatial structure of the IDS. A subsequent measurement of a common insulating liquid with a nearby noise source demonstrates a considerable reduction in the standard deviation of the relative permittivity from σ unshielded = ± 9.5% to σ shielded = ± 0.6%. The presented findings enhance our understanding of IDS in respect to the influence of a Faraday shield on the capacitance, parasitic capacitances of the IDS and external noise impact on the measurement of ϵ r .

A droplet-based passive force sensor for remote tactile sensing applications

Science.gov (United States)

Nie, Baoqing; Yao, Ting; Zhang, Yiqiu; Liu, Jian; Chen, Xinjian

2018-01-01

A droplet-based flexible wireless force sensor has been developed for remote tactile-sensing applications. By integration of a droplet-based capacitive sensing unit and two circular planar coils, this inductor-capacitor (LC) passive sensor offers a platform for the mechanical force detection in a wireless transmitting mode. Under external loads, the membrane surface of the sensor deforms the underlying elastic droplet uniformly, introducing a capacitance response in tens of picofarads. The LC circuit transduces the applied force into corresponding variations of its resonance frequency, which is detected by an external electromagnetic coupling coil. Specifically, the liquid droplet features a mechanosensitive plasticity, which results in an increased device sensitivity as high as 2.72 MHz N-1. The high dielectric property of the droplet endows our sensor with high tolerance for noise and large capacitance values (20-40 pF), the highest value in the literature for the LC passive devices in comparable dimensions. It achieves excellent reproducibility under periodical loads ranging from 0 to 1.56 N and temperature fluctuations ranging from 10 °C to 55 °C. As an interesting conceptual demonstration, the flexible device has been configured into a fingertip-amounted setting in a highly compact package (of 11 mm × 11 mm × 0.25 mm) for remote contact force sensing in the table tennis game.

Conductometric gas sensors based on metal oxides modified with gold nanoparticles: a review

International Nuclear Information System (INIS)

Korotcenkov, Ghenadii; Cho, Beong K.; Brinzari, Vladimir

2016-01-01

This review (with 170 refs.) discusses approaches towards surface functionalizaton of metal oxides by gold nanoparticles, and the application of the resulting nanomaterials in resistive gas sensors. The articles is subdivided into sections on (a) methods for modification of metal oxides with gold nanoparticles; (b) the response of gold nanoparticle-modified metal oxide sensors to gaseous species, (c) a discussion of the limitations of such sensors, and (d) a discussion on future tasks and trends along with an outlook. It is shown that, in order to achieve significant improvements in sensor parameters, it is necessary to warrant a good control the size and density of gold nanoparticles on the surface of metal oxide crystallites, the state of gold in the cluster, and the properties of the metal oxide support. Current challenges include an improved reproducibility of sensor preparation, better long-term stabilities, and a better resistance to sintering and poisoning of gold clusters during operation. Additional research focused on better understanding the role of gold clusters and nanoparticles in gas-sensing effects is also required. (author)

AC-conductance and capacitance measurements for ethanol vapor detection using carbon nanotube-polyvinyl alcohol composite based devices.

Science.gov (United States)

Greenshields, Márcia W C C; Meruvia, Michelle S; Hümmelgen, Ivo A; Coville, Neil J; Mhlanga, Sabelo D; Ceragioli, Helder J; Quispe, Jose C Rojas; Baranauskas, Vitor

2011-03-01

We report the preparation of inexpensive ethanol sensor devices using multiwalled carbon nanotube-polyvinyl alcohol composite films deposited onto interdigitated electrodes patterned on phenolite substrates. We investigate the frequency dependent response of the device conductance and capacitance showing that higher sensitivity is obtained at higher frequency if the conductance is used as sensing parameter. In the case of capacitance measurements, higher sensitivity is obtained at low frequency. Ethanol detection at a concentration of 300 ppm in air is demonstrated. More than 80% of the sensor conductance and capacitance variation response occurs in less than 20 s.

pH sensors based on iridium oxide

International Nuclear Information System (INIS)

Tarlov, M.J.; Kreider, K.G.; Semancik, S.; Huang, P.

1990-03-01

Results are presented on the pH-potential response of dc magnetron reactively sputtered iridium oxide films. The films exhibit a nearly Nernstian response to pH, no hysteresis effects, and minimal response to ionic interferences. Sensitivity to certain redox species is observed, however. In addition, methods are discussed for preparing model iridium oxide sensor surfaces for ultrahigh vacuum surface analytical studies. Stoichiometric IrO 2 -like surfaces are shown to be relatively inert to gas phase water. However, hydroxylation of IrO 2 -like surfaces can be induced by rf water plasma treatment. 17 refs., 5 figs

Meso-/Nanoporous Semiconducting Metal Oxides for Gas Sensor Applications

Directory of Open Access Journals (Sweden)

Nguyen Duc Hoa

2015-01-01

Full Text Available Development and/or design of new materials and/or structures for effective gas sensor applications with fast response and high sensitivity, selectivity, and stability are very important issues in the gas sensor technology. This critical review introduces our recent progress in the development of meso-/nanoporous semiconducting metal oxides and their applications to gas sensors. First, the basic concepts of resistive gas sensors and the recent synthesis of meso-/nanoporous metal oxides for gas sensor applications are introduced. The advantages of meso-/nanoporous metal oxides are also presented, taking into account the crystallinity and ordered/disordered porous structures. Second, the synthesis methods of meso-/nanoporous metal oxides including the soft-template, hard-template, and temple-free methods are introduced, in which the advantages and disadvantages of each synthetic method are figured out. Third, the applications of meso-/nanoporous metal oxides as gas sensors are presented. The gas nanosensors are designed based on meso-/nanoporous metal oxides for effective detection of toxic gases. The sensitivity, selectivity, and stability of the meso-/nanoporous gas nanosensors are also discussed. Finally, some conclusions and an outlook are presented.

An Electrochemical Sensor Based on Nanostructured Hollandite-type Manganese Oxide for Detection of Potassium Ions

Directory of Open Access Journals (Sweden)

Alex S. Lima

2009-08-01

Full Text Available The participation of cations in redox reactions of manganese oxides provides an opportunity for development of chemical sensors for non-electroactive ions. A sensor based on a nanostructured hollandite-type manganese oxide was investigated for voltammetric detection of potassium ions. The detection is based on the measurement of anodic current generated by oxidation of Mn(III to Mn(IV at the surface of the electrode and the subsequent extraction of the potassium ions into the hollandite structure. In this work, an amperometric procedure at an operating potential of 0.80 V (versus SCE is exploited for amperometric monitoring. The current signals are linearly proportional to potassium ion concentration in the range 4.97 × 10−5 to 9.05 × 10−4 mol L−1, with a correlation coefficient of 0.9997.

Enhanced and selective ammonia sensing of reduced graphene oxide based chemo resistive sensor at room temperature

Science.gov (United States)

Kumar, Ramesh; Kaur, Amarjeet

2016-05-01

The reduced graphene oxide thin films were fabricated by using the spin coating method. The reduced graphene oxide samples were characterised by Raman studies to obtain corresponding D and G bands at 1360 and 1590 cm-1 respectively. Fourier transform infra-red (FTIR) spectra consists of peak corresponds to sp2 hybridisation of carbon atoms at 1560 cm-1. The reduced graphene oxide based chemoresistive sensor exhibited a p-type semiconductor behaviour in ambient conditions and showed good sensitivity to different concentration of ammonia from 25 ppm to 500 ppm and excellent selectivity at room temperature. The sensor displays selectivity to several hazardous vapours such as methanol, ethanol, acetone and hydrazine hydrate. The sensor demonstrated a sensitivity of 9.8 at 25 ppm concentration of ammonia with response time of 163 seconds.

Synthesis and super capacitance of goethite/reduced graphene oxide for supercapacitors

Energy Technology Data Exchange (ETDEWEB)

Xu, Huan; Hu, Zhongai, E-mail: zhongai@nwnu.edu.cn; Lu, Ailian; Hu, Yingying; Li, Li; Yang, Yuying; Zhang, Ziyu; Wu, Hongying

2013-08-15

We report a one-step fabrication of α-iron oxyhydroxide/reduced graphene oxide (α-FeOOH/rGO) composites, in which the ferrous sulfate (FeSO{sub 4}·7H{sub 2}O) are used as the iron raw and reducing agent to grow goethite (α-FeOOH) and reduce graphite oxide (GO) to rGO in the same time. The morphology, composition and microstructure of the as-obtained samples are systematically characterized by thermogravimetric (TG) analysis, field emission scanning electron microscopy (FE-SEM), transmission electron microscopy (TEM), X-ray diffraction (XRD), and FT-IR. Moreover, their electrochemical properties are investigated using cyclic voltammetry and galvanostatic charge/discharge techniques. The specific capacitance of 452 F g{sup −1} is obtained at a specific current of 1 A g{sup −1} when the mass ratio of α-FeOOH to rGO is up to 80.3:19.7. In addition, the α-FeOOH/rGO composite electrodes exhibit the excellent rate capability (more than 79% retention at 10 A g{sup −1} relative to 1 A g{sup −1}) and well cycling stability (13% capacitance decay after 1000 cycles). These results suggest the importance and great potential of α-FeOOH/rGO composites in the applications of high-performance energy-storage. - Graphical abstract: α-FeOOH loaded on rGO sheets reveals excellent super-capacitive performance. Display Omitted - Highlights: • A one-step synthesis of the environmentally friendly electrode material is designed. • Ferrous sulfate is used as both iron raw source of goethite and reductant of GO. • α-FeOOH nanorods loaded on rGO sheets arrange into a raft-like array. • The resultant composite exhibits high specific capacitance and long cycling stability.

Synthesis and super capacitance of goethite/reduced graphene oxide for supercapacitors

International Nuclear Information System (INIS)

Xu, Huan; Hu, Zhongai; Lu, Ailian; Hu, Yingying; Li, Li; Yang, Yuying; Zhang, Ziyu; Wu, Hongying

2013-01-01

We report a one-step fabrication of α-iron oxyhydroxide/reduced graphene oxide (α-FeOOH/rGO) composites, in which the ferrous sulfate (FeSO 4 ·7H 2 O) are used as the iron raw and reducing agent to grow goethite (α-FeOOH) and reduce graphite oxide (GO) to rGO in the same time. The morphology, composition and microstructure of the as-obtained samples are systematically characterized by thermogravimetric (TG) analysis, field emission scanning electron microscopy (FE-SEM), transmission electron microscopy (TEM), X-ray diffraction (XRD), and FT-IR. Moreover, their electrochemical properties are investigated using cyclic voltammetry and galvanostatic charge/discharge techniques. The specific capacitance of 452 F g −1 is obtained at a specific current of 1 A g −1 when the mass ratio of α-FeOOH to rGO is up to 80.3:19.7. In addition, the α-FeOOH/rGO composite electrodes exhibit the excellent rate capability (more than 79% retention at 10 A g −1 relative to 1 A g −1 ) and well cycling stability (13% capacitance decay after 1000 cycles). These results suggest the importance and great potential of α-FeOOH/rGO composites in the applications of high-performance energy-storage. - Graphical abstract: α-FeOOH loaded on rGO sheets reveals excellent super-capacitive performance. Display Omitted - Highlights: • A one-step synthesis of the environmentally friendly electrode material is designed. • Ferrous sulfate is used as both iron raw source of goethite and reductant of GO. • α-FeOOH nanorods loaded on rGO sheets arrange into a raft-like array. • The resultant composite exhibits high specific capacitance and long cycling stability

A novel flexible capacitive load sensor for use in a mobile unicompartmental knee replacement bearing: An in vitro proof of concept study.

Science.gov (United States)

Mentink, M J A; Van Duren, B H; Murray, D W; Gill, H S

2017-08-01

Instrumented knee replacements can provide in vivo data quantifying physiological loads acting on the knee. To date instrumented mobile unicompartmental knee replacements (UKR) have not been realised. Ideally instrumentation would be embedded within the polyethylene bearing. This study investigated the feasibility of an embedded flexible capacitive load sensor. A novel flexible capacitive load sensor was developed which could be incorporated into standard manufacturing of compression moulded polyethylene bearings. Dynamic experiments were performed to determine the characteristics of the sensor on a uniaxial servo-hydraulic material testing machine. The instrumented bearing was measured at sinusoidal frequencies between 0.1 and 10Hz, allowing for measurement of typical gait load magnitudes and frequencies. These correspond to frequencies of interest in physiological loading. The loads that were applied were a static load of 390N, corresponding to an equivalent body weight load for UKR, and a dynamic load of ±293N. The frequency transfer response of the sensor suggests a low pass filter response with a -3dB frequency of 10Hz. The proposed embedded capacitive load sensor was shown to be applicable for measuring in vivo loads within a polyethylene mobile UKR bearing. Copyright © 2017 IPEM. Published by Elsevier Ltd. All rights reserved.

Evaluation of Pressure Capacitive Sensors for Application in Grasping and Manipulation Analysis.

Science.gov (United States)

Pessia, Paola; Cordella, Francesca; Schena, Emiliano; Davalli, Angelo; Sacchetti, Rinaldo; Zollo, Loredana

2017-12-08

The analysis of the human grasping and manipulation capabilities is paramount for investigating human sensory-motor control and developing prosthetic and robotic hands resembling the human ones. A viable solution to perform this analysis is to develop instrumented objects measuring the interaction forces with the hand. In this context, the performance of the sensors embedded in the objects is crucial. This paper focuses on the experimental characterization of a class of capacitive pressure sensors suitable for biomechanical analysis. The analysis was performed in three loading conditions (Distributed load, 9 Tips load, and Wave-shaped load, thanks to three different inter-elements) via a traction/compression testing machine. Sensor assessment was also carried out under human- like grasping condition by placing a silicon material with the same properties of prosthetic cosmetic gloves in between the sensor and the inter-element in order to simulate the human skin. Data show that the input-output relationship of the analyzed, sensor is strongly influenced by both the loading condition (i.e., type of inter-element) and the grasping condition (with or without the silicon material). This needs to be taken into account to avoid significant measurement error. To go over this hurdle, the sensors have to be calibrated under each specific condition in order to apply suitable corrections to the sensor output and significantly improve the measurement accuracy.

Low Working-Temperature Acetone Vapor Sensor Based on Zinc Nitride and Oxide Hybrid Composites.

Science.gov (United States)

Qu, Fengdong; Yuan, Yao; Guarecuco, Rohiverth; Yang, Minghui

2016-06-01

Transition-metal nitride and oxide composites are a significant class of emerging materials that have attracted great interest for their potential in combining the advantages of nitrides and oxides. Here, a novel class of gas sensing materials based on hybrid Zn3 N2 and ZnO composites is presented. The Zn3 N2 /ZnO (ZnNO) composites-based sensor exhibits selectivity and high sensitivity toward acetone vapor, and the sensitivity is dependent on the nitrogen content of the composites. The ZnNO-11.7 described herein possesses a low working temperature of 200 °C. The detection limit (0.07 ppm) is below the diabetes diagnosis threshold (1.8 ppm). In addition, the sensor shows high reproducibility and long-term stability. © 2016 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

Capacitance of carbon-based electrical double-layer capacitors.

Science.gov (United States)

Ji, Hengxing; Zhao, Xin; Qiao, Zhenhua; Jung, Jeil; Zhu, Yanwu; Lu, Yalin; Zhang, Li Li; MacDonald, Allan H; Ruoff, Rodney S

2014-01-01

Experimental electrical double-layer capacitances of porous carbon electrodes fall below ideal values, thus limiting the practical energy densities of carbon-based electrical double-layer capacitors. Here we investigate the origin of this behaviour by measuring the electrical double-layer capacitance in one to five-layer graphene. We find that the capacitances are suppressed near neutrality, and are anomalously enhanced for thicknesses below a few layers. We attribute the first effect to quantum capacitance effects near the point of zero charge, and the second to correlations between electrons in the graphene sheet and ions in the electrolyte. The large capacitance values imply gravimetric energy storage densities in the single-layer graphene limit that are comparable to those of batteries. We anticipate that these results shed light on developing new theoretical models in understanding the electrical double-layer capacitance of carbon electrodes, and on opening up new strategies for improving the energy density of carbon-based capacitors.

Design and application of a metal wet-etching post-process for the improvement of CMOS-MEMS capacitive sensors

International Nuclear Information System (INIS)

Tsai, Ming-Han; Sun, Chih-Ming; Liu, Yu-Chia; Fang, Weileun; Wang, Chuanwei

2009-01-01

This study presents a process design methodology to improve the performance of a CMOS-MEMS gap-closing capacitive sensor. In addition to the standard CMOS process, the metal wet-etching approach is employed as the post-CMOS process to realize the present design. The dielectric layers of the CMOS process are exploited to form the main micro mechanical structures of the sensor. The metal layers of the CMOS process are used as the sensing electrodes and sacrificial layers. The advantages of the sensor design are as follows: (1) the parasitic capacitance is significantly reduced by the dielectric structure, (2) in-plane and out-of-plane sensing gaps can be reduced to increase the sensitivity, and (3) plate-type instead of comb-type out-of-plane sensing electrodes are available to increase the sensing electrode area. To demonstrate the feasibility of the present design, a three-axis capacitive CMOS-MEMS accelerometers chip is implemented and characterized. Measurements show that the sensitivities of accelerometers reach 11.5 mV G −1 (in the X-, Y-axes) and 7.8 mV G −1 (in the Z-axis), respectively, which are nearly one order larger than existing designs. Moreover, the detection of 10 mG excitation using the three-axis accelerometer is demonstrated for both in-plane and out-of-plane directions

A reciprocity-based formula for the capacitance with quadrupolar electrodes

Energy Technology Data Exchange (ETDEWEB)

Cho, Sungbo [Gachon University of Medicine and Science, Incheon (Korea, Republic of)

2011-11-15

A new capacitance formula for the practical design and characterization of quadrupolar electrode arrays with capacitive structures was derived based on the reciprocal theorem. The reciprocity-based capacitance formula agreed with the empirical equations established to estimate the capacitance of a single strip line or disk electrode compensating for the fringing field effect that occurs at the electrode edge. The reciprocity-based formula was applied to compute the capacitance measurable by using a quadrupolar square electrode array with a symmetric dipole-dipole configuration and was compared with the analytical equation established based on the image method assuming that the electrodes were points. The results showed that the capacitance of the quadrupolar electrodes was determined by the size of the quadrupolar electrodes relative to the separation distance between the electrodes and that the reciprocity-based capacitance formula was in agreement with the established analytical equation if the separated distance between the electrodes relative to the electrode size was large enough.

A reciprocity-based formula for the capacitance with quadrupolar electrodes

International Nuclear Information System (INIS)

Cho, Sungbo

2011-01-01

A new capacitance formula for the practical design and characterization of quadrupolar electrode arrays with capacitive structures was derived based on the reciprocal theorem. The reciprocity-based capacitance formula agreed with the empirical equations established to estimate the capacitance of a single strip line or disk electrode compensating for the fringing field effect that occurs at the electrode edge. The reciprocity-based formula was applied to compute the capacitance measurable by using a quadrupolar square electrode array with a symmetric dipole-dipole configuration and was compared with the analytical equation established based on the image method assuming that the electrodes were points. The results showed that the capacitance of the quadrupolar electrodes was determined by the size of the quadrupolar electrodes relative to the separation distance between the electrodes and that the reciprocity-based capacitance formula was in agreement with the established analytical equation if the separated distance between the electrodes relative to the electrode size was large enough.

Biomimetic actuator and sensor for robot hand

International Nuclear Information System (INIS)

Kim, Baekchul; Chung, Jinah; Cho, Hanjoung; Shin, Seunghoon; Lee, Hyoungsuk; Moon, Hyungpil; Choi, Hyouk Ryeol; Koo, Jachoon

2012-01-01

To manufacture a robot hand that essentially mimics the functions of a human hand, it is necessary to develop flexible actuators and sensors. In this study, we propose the design, manufacture, and performance verification of flexible actuators and sensors based on Electro Active Polymer (EAP). EAP is fabricated as a type of film, and it moves with changes in the voltage because of contraction and expansion in the polymer film. Furthermore, if a force is applied to an EAP film, its thickness and effective area change, and therefore, the capacitance also changes. By using this mechanism, we produce capacitive actuators and sensors. In this study, we propose an EAP based capacitive sensor and evaluate its use as a robot hand sensor

Biomimetic actuator and sensor for robot hand

Energy Technology Data Exchange (ETDEWEB)

Kim, Baekchul; Chung, Jinah; Cho, Hanjoung; Shin, Seunghoon; Lee, Hyoungsuk; Moon, Hyungpil; Choi, Hyouk Ryeol; Koo, Jachoon [Sungkyunkwan Univ., Seoul (Korea, Republic of)

2012-12-15

To manufacture a robot hand that essentially mimics the functions of a human hand, it is necessary to develop flexible actuators and sensors. In this study, we propose the design, manufacture, and performance verification of flexible actuators and sensors based on Electro Active Polymer (EAP). EAP is fabricated as a type of film, and it moves with changes in the voltage because of contraction and expansion in the polymer film. Furthermore, if a force is applied to an EAP film, its thickness and effective area change, and therefore, the capacitance also changes. By using this mechanism, we produce capacitive actuators and sensors. In this study, we propose an EAP based capacitive sensor and evaluate its use as a robot hand sensor.

Enhanced and selective ammonia sensing of reduced graphene oxide based chemo resistive sensor at room temperature

Energy Technology Data Exchange (ETDEWEB)

Kumar, Ramesh, E-mail: rameshphysicsdu@gmail.com; Kaur, Amarjeet, E-mail: amarkaur@physics.du.ac.in [Department of Physics and Astrophysics, University of Delhi, Delhi-110007 (India)

2016-05-06

The reduced graphene oxide thin films were fabricated by using the spin coating method. The reduced graphene oxide samples were characterised by Raman studies to obtain corresponding D and G bands at 1360 and 1590 cm{sup −1} respectively. Fourier transform infra-red (FTIR) spectra consists of peak corresponds to sp{sup 2} hybridisation of carbon atoms at 1560 cm{sup −1}. The reduced graphene oxide based chemoresistive sensor exhibited a p-type semiconductor behaviour in ambient conditions and showed good sensitivity to different concentration of ammonia from 25 ppm to 500 ppm and excellent selectivity at room temperature. The sensor displays selectivity to several hazardous vapours such as methanol, ethanol, acetone and hydrazine hydrate. The sensor demonstrated a sensitivity of 9.8 at 25 ppm concentration of ammonia with response time of 163 seconds.

Nickel oxide film with open macropores fabricated by surfactant-assisted anodic deposition for high capacitance supercapacitors.

Science.gov (United States)

Wu, Mao-Sung; Wang, Min-Jyle

2010-10-07

Nickel oxide film with open macropores prepared by anodic deposition in the presence of surfactant shows a very high capacitance of 1110 F g(-1) at a scan rate of 10 mV s(-1), and the capacitance value reduces to 950 F g(-1) at a high scan rate of 200 mV s(-1).

Comparison of capacitive and radio frequency resonator sensors for monitoring parallelized droplet microfluidic production

KAUST Repository

Conchouso Gonzalez, David

2016-06-28

Scaled-up production of microfluidic droplets, through the parallelization of hundreds of droplet generators, has received a lot of attention to bring novel multiphase microfluidics research to industrial applications. However, apart from droplet generation, other significant challenges relevant to this goal have never been discussed. Examples include monitoring systems, high-throughput processing of droplets and quality control procedures among others. In this paper, we present and compare capacitive and radio frequency (RF) resonator sensors as two candidates that can measure the dielectric properties of emulsions in microfluidic channels. By placing several of these sensors in a parallelization device, the stability of the droplet generation at different locations can be compared, and potential malfunctions can be detected. This strategy enables for the first time the monitoring of scaled-up microfluidic droplet production. Both sensors were prototyped and characterized using emulsions with droplets of 100-150 μm in diameter, which were generated in parallelization devices at water-in-oil volume fractions (φ) between 11.1% and 33.3%.Using these sensors, we were able to measure accurately increments as small as 2.4% in the water volume fraction of the emulsions. Although both methods rely on the dielectric properties of the emulsions, the main advantage of the RF resonator sensors is the fact that they can be designed to resonate at multiple frequencies of the broadband transmission line. Consequently with careful design, two or more sensors can be parallelized and read out by a single signal. Finally, a comparison between these sensors based on their sensitivity, readout cost and simplicity, and design flexibility is also discussed. © 2016 The Royal Society of Chemistry.

Capacitive properties of PANI/MnO2 synthesized via simultaneous-oxidation route

International Nuclear Information System (INIS)

Zhang Jie; Shu Dong; Zhang Tianren; Chen Hongyu; Zhao Haimin; Wang Yongsheng; Sun Zhenjie; Tang Shaoqing; Fang Xueming; Cao Xiufang

2012-01-01

Highlights: ► PANI/MnO 2 composite was synthesized by the simultaneous-oxidation route. ► Good contact in inter-molecule level between PANI and MnO 2 improves the conductivity. ► The separation between PANI and MnO 2 prevents the aggregation of nano-composite. ► The maximum specific capacitance of the PANI/MnO 2 electrode is 320 F/g. ► The as-prepared PANI/MnO 2 exhibits excellent cycle stability of 84% capacitance retention after 10,000 cycles. - Abstract: Polyaniline (PANI) and manganese dioxide (MnO 2 ) composite (PANI/MnO 2 ) was synthesized via a simultaneous-oxidation route. In this route, all reactants were dispersed homogenously in precursor solution and existed as ions and molecules, and involved reactions of ions and molecules generating PANI and MnO 2 simultaneously. In this way, PANI molecule and MnO 2 molecule contact each other and arrange alternately in the composite. The inter-molecule contact improves the conductivity of the composite. The alternative arrangement of PANI molecules and MnO 2 molecules separating each other, and prevents the aggregation of PANI and cluster of MnO 2 so as to decrease the particle size of the composite. The morphology, structure, porous and capacitive properties are characterized by scanning electron microscopy, X-ray diffraction spectroscopy, X-ray photoelectron spectroscopy, Branauer–Emmett–Teller test, thermogravimetric analysis, Fourier transform infrared spectroscopy, cyclic voltammetry, charge–discharge test and the electrochemical impedance measurements. The results show that MnO 2 is predominant in the PANI/MnO 2 composite and the composite exhibits larger specific surface area than pure MnO 2 . The maximum specific capacitance of the composite electrode reaches up to 320 F/g by charge–discharge test, 1.56 times higher than that of MnO 2 (125 F/g). The specific capacitance retains approximately 84% of the initial value after 10,000 cycles, indicating the good cycle stability.

A Self-Powered and Autonomous Fringing Field Capacitive Sensor Integrated into a Micro Sprinkler Spinner to Measure Soil Water Content

Directory of Open Access Journals (Sweden)

Eduardo Ferreira da Costa

2017-03-01

Full Text Available We present here the design and fabrication of a self-powered and autonomous fringing field capacitive sensor to measure soil water content. The sensor is manufactured using a conventional printed circuit board and includes a porous ceramic. To read the sensor, we use a circuit that includes a 10 kHz triangle wave generator, an AC amplifier, a precision rectifier and a microcontroller. In terms of performance, the sensor’s capacitance (measured in a laboratory prototype increases up to 5% when the volumetric water content of the porous ceramic changed from 3% to 36%, resulting in a sensitivity of S = 15.5 pF per unity change. Repeatability tests for capacitance measurement showed that the θ v sensor’s root mean square error is 0.13%. The average current consumption of the system (sensor and signal conditioning circuit is less than 1.5 μ A, which demonstrates its suitability for being powered by energy harvesting systems. We developed a complete irrigation control system that integrates the sensor, an energy harvesting module composed of a microgenerator installed on the top of a micro sprinkler spinner, and a DC/DC converter circuit that charges a 1 F supercapacitor. The energy harvesting module operates only when the micro sprinkler spinner is irrigating the soil, and the supercapacitor is fully charged to 5 V in about 3 h during the first irrigation. After the first irrigation, with the supercap fully charged, the system can operate powered only by the supercapacitor for approximately 23 days, without any energy being harvested.

MEMS capacitive accelerometer-based middle ear microphone.

Science.gov (United States)

Young, Darrin J; Zurcher, Mark A; Semaan, Maroun; Megerian, Cliff A; Ko, Wen H

2012-12-01

The design, implementation, and characterization of a microelectromechanical systems (MEMS) capacitive accelerometer-based middle ear microphone are presented in this paper. The microphone is intended for middle ear hearing aids as well as future fully implantable cochlear prosthesis. Human temporal bones acoustic response characterization results are used to derive the accelerometer design requirements. The prototype accelerometer is fabricated in a commercial silicon-on-insulator (SOI) MEMS process. The sensor occupies a sensing area of 1 mm × 1 mm with a chip area of 2 mm × 2.4 mm and is interfaced with a custom-designed low-noise electronic IC chip over a flexible substrate. The packaged sensor unit occupies an area of 2.5 mm × 6.2 mm with a weight of 25 mg. The sensor unit attached to umbo can detect a sound pressure level (SPL) of 60 dB at 500 Hz, 35 dB at 2 kHz, and 57 dB at 8 kHz. An improved sound detection limit of 34-dB SPL at 150 Hz and 24-dB SPL at 500 Hz can be expected by employing start-of-the-art MEMS fabrication technology, which results in an articulation index of approximately 0.76. Further micro/nanofabrication technology advancement is needed to enhance the microphone sensitivity for improved understanding of normal conversational speech.

Towards a Capacitive Enzyme Sensor for Direct Determination of Organophosphorus Pesticides: Fundamental Studies and Aspects of Development

Directory of Open Access Journals (Sweden)

Ashok Mulchandani

2003-06-01

Full Text Available The realisation of a miniaturised potentiometric enzyme biosensor is presented. The biosensor chip utilises the enzyme organophosphorus hydrolase (OPH for the direct determination of pesticides. The transducer structure of the sensors chip consists of a pH-sensitive capacitive electrolyte-insulator-semiconductor (EIS structure that reacts towards pH changes caused by the OPH-catalised hydrolysis of the organophosphate compounds. The biosensor is operated versus a conventional Ag/AgCl reference electrode. Measurements were performed in the capacitance/voltage (C/V and the constant capacitance (ConCap mode for the two different pesticides paraoxon and parathion. For the development of this new type of biosensor, different immobilisation strategies, influence of buffer composition and concentration, transducer material, detection limit, long-term stability and selectivity have been studied.

Carrier behavior in special multilayer device composed of different transition metal oxide-based intermediate connectors

International Nuclear Information System (INIS)

Deng, Yan-Hong; Chen, Xiang-Yu; Ou, Qing-Dong; Wang, Qian-Kun; Jiang, Xiao-Cheng; Zhang, Dan-Dan; Li, Yan-Qing

2014-01-01

The impact of illumination on the connection part of the tandem organic light-emitting diodes was studied by using a special organic multilayer sample consisted of two organic active layers coupled with different transition metal oxide (TMO)-based intermediate connectors (ICs). Through measuring the current density-voltage characteristic, interfacial electronic structures, and capacitance-voltage characteristic, we observe an unsymmetrical phenomenon in current density-voltage and capacitance-voltage curves of Mg:Alq 3 /MoO 3 and MoO 3 composed devices, which was induced by the charge spouting zone near the ICs region and the recombination state in the MoO 3 layer. Moreover, Mg:Alq 3 /MoO 3 composed device displays a photovoltaic effect and the V oc shifts to forward bias under illumination. Our results demonstrate that the TMO-based IC structure coupled with photovoltaic effect can be a good approach for the study of photodetector, light sensor, and so on.

A Probabilistic Mass Estimation Algorithm for a Novel 7- Channel Capacitive Sample Verification Sensor

Science.gov (United States)

Wolf, Michael

2012-01-01

A document describes an algorithm created to estimate the mass placed on a sample verification sensor (SVS) designed for lunar or planetary robotic sample return missions. A novel SVS measures the capacitance between a rigid bottom plate and an elastic top membrane in seven locations. As additional sample material (soil and/or small rocks) is placed on the top membrane, the deformation of the membrane increases the capacitance. The mass estimation algorithm addresses both the calibration of each SVS channel, and also addresses how to combine the capacitances read from each of the seven channels into a single mass estimate. The probabilistic approach combines the channels according to the variance observed during the training phase, and provides not only the mass estimate, but also a value for the certainty of the estimate. SVS capacitance data is collected for known masses under a wide variety of possible loading scenarios, though in all cases, the distribution of sample within the canister is expected to be approximately uniform. A capacitance-vs-mass curve is fitted to this data, and is subsequently used to determine the mass estimate for the single channel s capacitance reading during the measurement phase. This results in seven different mass estimates, one for each SVS channel. Moreover, the variance of the calibration data is used to place a Gaussian probability distribution function (pdf) around this mass estimate. To blend these seven estimates, the seven pdfs are combined into a single Gaussian distribution function, providing the final mean and variance of the estimate. This blending technique essentially takes the final estimate as an average of the estimates of the seven channels, weighted by the inverse of the channel s variance.

Facile coating of manganese oxide on tin oxide nanowires with high-performance capacitive behavior.

Science.gov (United States)

Yan, Jian; Khoo, Eugene; Sumboja, Afriyanti; Lee, Pooi See

2010-07-27

In this paper, a very simple solution-based method is employed to coat amorphous MnO2 onto crystalline SnO2 nanowires grown on stainless steel substrate, which utilizes the better electronic conductivity of SnO2 nanowires as the supporting backbone to deposit MnO2 for supercapacitor electrodes. Cyclic voltammetry (CV) and galvanostatic charge/discharge methods have been carried out to study the capacitive properties of the SnO2/MnO2 composites. A specific capacitance (based on MnO2) as high as 637 F g(-1) is obtained at a scan rate of 2 mV s(-1) (800 F g(-1) at a current density of 1 A g(-1)) in 1 M Na2SO4 aqueous solution. The energy density and power density measured at 50 A g(-1) are 35.4 W h kg(-1) and 25 kW kg(-1), respectively, demonstrating the good rate capability. In addition, the SnO2/MnO2 composite electrode shows excellent long-term cyclic stability (less than 1.2% decrease of the specific capacitance is observed after 2000 CV cycles). The temperature-dependent capacitive behavior is also discussed. Such high-performance capacitive behavior indicates that the SnO2/MnO2 composite is a very promising electrode material for fabricating supercapacitors.

A 94GHz Temperature Compensated Low Noise Amplifier in 45nm Silicon-on-Insulator Complementary Metal-Oxide Semiconductor (SOI CMOS)

Science.gov (United States)

2014-01-01

ring oscillator based temperature sensor will be designed to compensate for gain variations over temperature. For comparison to a competing solution...Simulated (Green) Capacitance of the GSG Pads ........................ 9 Figure 6: Die Picture and Schematic of the L-2L Coplanar Waveguides...complementary metal-oxide-semiconductor (CMOS) technology. A ring oscillator based temperature sensor was designed to compensate for gain variations

Investigation of column flotation process on sulphide ore using 2-electrode capacitance sensor: The effect of air flow rate and solid percentage

Science.gov (United States)

Haryono, Didied; Harjanto, Sri; Wijaya, Rifky; Oediyani, Soesaptri; Nugraha, Harisma; Huda, Mahfudz Al; Taruno, Warsito Purwo

2018-04-01

Investigation of column flotation process on sulphide ore using 2-electrode capacitance sensor is presented in this paper. The effect of air flow rate and solid percentage on column flotation process has been experimentally investigated. The purpose of this paper is to understand the capacitance signal characteristic affected by the air flow rate and the solid percentage which can be used to determine the metallurgical performance. Experiments were performed using a laboratory column flotation cell which has a diameter of 5 cm and the total height of 140 cm. The sintered ceramic sparger and wash water were installed at the bottom and above of the column. Two-electrode concave type capacitance sensor was also installed at a distance of 50 cm from the sparger. The sensor was attached to the outer wall of the column, connected to data acquisition system, manufactured by CTECH Labs Edwar Technology and personal computer for further data processing. Feed consisting ZnS and SiO2 with the ratio of 3:2 was mixed with some reagents to make 1 litre of slurry. The slurry was fed into the aerated column at 100 cm above the sparger with a constant rate and the capacitance signals were captured during the process. In this paper, 7.5 and 10% of solid and 2-4 L/min of air flow rate with 0.5 L/min intervals were used as independent variables. The results show that the capacitance signal characteristics between the 7.5 and 10% of solid are different at any given air flow rate in which the 10% solid produced signals higher than those of 7.5%. Metallurgical performance and capacitance signal exhibit a good correlation.

Phenylboronic acid functionalized reduced graphene oxide based fluorescence nano sensor for glucose sensing

Energy Technology Data Exchange (ETDEWEB)

Basiruddin, SK; Swain, Sarat K., E-mail: swainsk2@yahoo.co.in

2016-01-01

Reduced graphene has emerged as promising tools for detection based application of biomolecules as it has high surface area with strong fluorescence quenching property. We have used the concept of fluorescent quenching property of reduced graphene oxide to the fluorescent probes which are close vicinity of its surface. In present work, we have synthesized fluorescent based nano-sensor consist of phenylboronic acid functionalized reduced graphene oxide (rGO–PBA) and di-ol modified fluorescent probe for detection of biologically important glucose molecules. This fluorescent graphene based nano-probe has been characterized by high resolution transmission electron microscope (HRTEM), Atomic force microscope (AFM), UV–visible, Photo-luminescence (PL) and Fourier transformed infrared (FT-IR) spectroscopy. Finally, using this PBA functionalized reduced GO based nano-sensor, we were able to detect glucose molecule in the range of 2 mg/mL to 75 mg/mL in aqueous solution of pH 7.4. - Highlights: • Easy and simple synthesis of PBA functionalized reduced GO based nano probe. • PBA functionalized reduced GO graphene based nano-probes are characterized. • PBA functionalized reduced GO nano probe is used to detect glucose molecules. • It is very cost-effective and enzyme-free detection of glucose in solution.

Integrated microelectronic capacitive readout subsystem for lab-on-a-chip applications

International Nuclear Information System (INIS)

Spathis, Christos; Georgakopoulou, Konstantina; Petrellis, Nikos; Efstathiou, Konstantinos; Birbas, Alexios

2014-01-01

A mixed-signal capacitive biosensor readout system is presented with its main readout functionality embedded in an integrated circuit, compatible with complementary metal oxide semiconductor-type biosensors. The system modularity allows its usage as a consumable since it eventually leads to a system-on-chip where sensor and readout circuitry are hosted on the same die. In this work, a constant current source is used for measuring the input capacitance. Compared to most capacitive biosensor readout circuits, this method offers the convenience of adjusting both the range and the resolution, depending on the requirements dictated by the application. The chip consumes less than 5 mW of power and the die area is 0.06 mm 2 . It shows a broad input capacitance range (capable of measuring bio-capacitances from 6 pF to 9.8 nF), configurable resolution (down to 1 fF), robustness to various biological experiments and good linearity. The integrated nature of the readout system is proven to be sufficient both for one-time in situ (consumable-type) bio-measurements and its incorporation into a point-of-care system. (paper)

Packaging Technologies for High Temperature Electronics and Sensors

Science.gov (United States)

Chen, Liangyu; Hunter, Gary W.; Neudeck, Philip G.; Beheim, Glenn M.; Spry, David J.; Meredith, Roger D.

2013-01-01

This paper reviews ceramic substrates and thick-film metallization based packaging technologies in development for 500degC silicon carbide (SiC) electronics and sensors. Prototype high temperature ceramic chip-level packages and printed circuit boards (PCBs) based on ceramic substrates of aluminum oxide (Al2O3) and aluminum nitride (AlN) have been designed and fabricated. These ceramic substrate-based chiplevel packages with gold (Au) thick-film metallization have been electrically characterized at temperatures up to 550degC. A 96% alumina based edge connector for a PCB level subsystem interconnection has also been demonstrated recently. The 96% alumina packaging system composed of chip-level packages and PCBs has been tested with high temperature SiC devices at 500degC for over 10,000 hours. In addition to tests in a laboratory environment, a SiC JFET with a packaging system composed of a 96% alumina chip-level package and an alumina printed circuit board mounted on a data acquisition circuit board was launched as a part of the MISSE-7 suite to the International Space Station via a Shuttle mission. This packaged SiC transistor was successfully tested in orbit for eighteen months. A spark-plug type sensor package designed for high temperature SiC capacitive pressure sensors was developed. This sensor package combines the high temperature interconnection system with a commercial high temperature high pressure stainless steel seal gland (electrical feed-through). Test results of a packaged high temperature capacitive pressure sensor at 500degC are also discussed. In addition to the pressure sensor package, efforts for packaging high temperature SiC diode-based gas chemical sensors are in process.

Metal Oxides Doped PPY-PVA Blend Thin Films Based Gas Sensor

Directory of Open Access Journals (Sweden)

D. B. DUPARE

2009-02-01

Full Text Available Synthesis of metal oxides doped polypyrrole–polyvinyl alcohol blend thin films by in situ chemical oxidative polymerization, using microwave oven on glass substrate for development of Ammonia and Trimethyl ammine hazardous gas sensor. The all experimental process carried out at room temperature(304 K. These polymer materials were characterized by Chemical analyses, spectral studies (UV-visible and IR and conductivity measurement by four –probe technique. The surface morphology as observed in the SEM image was observed to be uniformly covering the entire substrate surface. The sensor was used for different concentration (ppm of TMA and Ammonia gas investigation at room temperature (304 k. This study found to possess improved electrical, mechanical and environmental stability metal oxides doped PPY-PVA films.

MOFs for the Sensitive Detection of Ammonia: Deployment of fcu-MOF Thin-Films as Effective Chemical Capacitive Sensors.

KAUST Repository

Assen, Ayalew Hussen Assen; Yassine, Omar; Shekhah, Osama; Eddaoudi, Mohamed; Salama, Khaled N.

2017-01-01

This work reports on the fabrication and deployment of a select metal-organic framework (MOF) thin film as an advanced chemical capacitive sensor for the sensing/detection of ammonia (NH3) at room temperature. Namely, the MOF thin film sensing layer

Microfluidic electrochemical sensor for on-line monitoring of aerosol oxidative activity.

Science.gov (United States)

Sameenoi, Yupaporn; Koehler, Kirsten; Shapiro, Jeff; Boonsong, Kanokporn; Sun, Yele; Collett, Jeffrey; Volckens, John; Henry, Charles S

2012-06-27

Particulate matter (PM) air pollution has a significant impact on human morbidity and mortality; however, the mechanisms of PM-induced toxicity are poorly defined. A leading hypothesis states that airborne PM induces harm by generating reactive oxygen species in and around human tissues, leading to oxidative stress. We report here a system employing a microfluidic electrochemical sensor coupled directly to a particle-into-liquid sampler (PILS) system to measure aerosol oxidative activity in an on-line format. The oxidative activity measurement is based on the dithiothreitol (DTT) assay, where, after being oxidized by PM, the remaining reduced DTT is analyzed by the microfluidic sensor. The sensor consists of an array of working, reference, and auxiliary electrodes fabricated in a poly(dimethylsiloxane)-based microfluidic device. Cobalt(II) phthalocyanine-modified carbon paste was used as the working electrode material, allowing selective detection of reduced DTT. The electrochemical sensor was validated off-line against the traditional DTT assay using filter samples taken from urban environments and biomass burning events. After off-line characterization, the sensor was coupled to a PILS to enable on-line sampling/analysis of aerosol oxidative activity. Urban dust and industrial incinerator ash samples were aerosolized in an aerosol chamber and analyzed for their oxidative activity. The on-line sensor reported DTT consumption rates (oxidative activity) in good correlation with aerosol concentration (R(2) from 0.86 to 0.97) with a time resolution of approximately 3 min.

Polypyrrole Porous Micro Humidity Sensor Integrated with a Ring Oscillator Circuit on Chip

Science.gov (United States)

Yang, Ming-Zhi; Dai, Ching-Liang; Lu, De-Hao

2010-01-01

This study presents the design and fabrication of a capacitive micro humidity sensor integrated with a five-stage ring oscillator circuit on chip using the complimentary metal oxide semiconductor (CMOS) process. The area of the humidity sensor chip is about 1 mm2. The humidity sensor consists of a sensing capacitor and a sensing film. The sensing capacitor is constructed from spiral interdigital electrodes that can enhance the sensitivity of the sensor. The sensing film of the sensor is polypyrrole, which is prepared by the chemical polymerization method, and the film has a porous structure. The sensor needs a post-CMOS process to coat the sensing film. The post-CMOS process uses a wet etching to etch the sacrificial layers, and then the polypyrrole is coated on the sensing capacitor. The sensor generates a change in capacitance when the sensing film absorbs or desorbs vapor. The ring oscillator circuit converts the capacitance variation of the sensor into the oscillation frequency output. Experimental results show that the sensitivity of the humidity sensor is about 99 kHz/%RH at 25 °C. PMID:22163459

Using Capacitance Sensors for the Continuous Measurement of the Water Content in the Litter Layer of Forest Soil

Directory of Open Access Journals (Sweden)

Mioko Ataka

2014-01-01

Full Text Available Little is known about the wetting and drying processes of the litter layer (L layer, likely because of technical difficulties inherent in nondestructive water content (WC monitoring. We developed a method for continuously measuring the WC of leaf litter (the “LWC method” in situ using capacitance sensors. To test variants of this approach, five (for the LWC_5 or ten (for the LWC_10 method Quercus serrata leaves were attached around capacitance sensors. The output voltage used for each LWC method was linearly correlated with the gravimetric WC (LWC_5: R2=0.940; LWC_10: R2=0.942, producing different slopes for each calibration line. For in situ continuous measurements of WC in the L layer, two sensors were used, one placed on top of the L layer and the other at the boundary between the L and mineral layers. The average continuous WC of the L layer was then calculated from the output voltage of the two sensors and the calibration function, and this value was linearly correlated with the gravimetric WC (R2=0.697. However, because the L layer characteristics (e.g., thickness, water-holding capacity, and species composition may differ among study sites, appropriate approaches for measuring this layer’s moisture properties may be needed.

2D nickel oxide nanosheets with highly porous structure for high performance capacitive energy storage

Science.gov (United States)

Li, Zijiong; Zhang, Weiyang; Liu, Yanyue; Guo, Jinjin; Yang, Baocheng

2018-01-01

Developing advanced electrochemical electrode materials with excellent performance is critical to their future energy storage devices. Herein, we design and synthesize two-dimensional (2D) porous structure nickel oxide (NiO) nanosheets via a facile and scalable hydrothermal approach, and further heating. The effects of heating time on the electrochemical performances are investigated. The results indicate that the maximum specific capacitance is achieved for NiO nanosheets when heating temperature and time are 300 °C and 3 h, respectively (namely NiO-3). The as-prepared NiO-3 nanosheet are grown uniform on the skeleton of reduced graphene oxide (rGO). The optimum NiO/rGO displays a reversible discharge capacity of 781.7 F g-1 at 1 A g-1, and shows an ultra-long life-span with over 94% capacitance retention after 4000 cycles. The enhanced electrochemical properties for NiO/rGO can be ascribed to a collaborative effect between NiO and rGO, which possess high capacitance storage ability and excellent conductivity, respectively.

A compact perspiration meter system with capacitive humidity sensor for wearable health-care applications

Science.gov (United States)

Mitani, Yusuke; Miyaji, Kousuke; Kaneko, Satoshi; Uekura, Takaharu; Momose, Hideya; Johguchi, Koh

2018-04-01

This paper presents a compact wearable perspiration meter system using a 180-nm CMOS technology. With custom chip and board design, the proposed perspiration meter, which can measure a qualitative sweating rate, is integrated into 15 × 20 mm2. From the experimental results, the capacitances of the humidity sensors with analog-to-digital converter and band-gap reference circuits can operate accurately without hysteresis. In addition, a demonstration with simulated human skin is carried out to investigate the sensor’s performance under real environments. The proposed perspiration meter can output values equivalent to a conventional meter. As a result, it is verified that the proposed system can be used as a human sweat sensor for wearable application.

Highly sensitive work function hydrogen gas sensor based on PdNPs/SiO2/Si structure at room temperature

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G. Behzadi pour

Full Text Available In this study, fabrication of highly sensitive PdNPs/SiO2/Si hydrogen gas sensor using experimental and theoretical methods has been investigated. Using chemical method the PdNPs are synthesized and characterized by X-ray diffraction (XRD. The average size of PdNPs is 11 nm. The thickness of the oxide film was 20 nm and the surface of oxide film analyzed using Atomic-force microscopy (AFM. The C-V curve for the PdNPs/SiO2/Si hydrogen gas sensor in 1% hydrogen concentration and at the room temperature has been reported. The response time and recovery time for 1% hydrogen concentration at room temperature were 1.2 s and 10 s respectively. The response (R% for PdNPs/SiO2/Si MOS capacitor hydrogen sensor was 96%. The PdNPs/SiO2/Si MOS capacitor hydrogen sensor showed very fast response and recovery times compared to SWCNTs/PdNPs, graphene/PdNPs, nanorod/PdNPs and nanowire/PdNPs hydrogen gas sensors. Keywords: Sensitive, Oxide film, Capacitive, Resistance

All-Optical Graphene Oxide Humidity Sensors

Directory of Open Access Journals (Sweden)

Weng Hong Lim

2014-12-01

Full Text Available The optical characteristics of graphene oxide (GO were explored to design and fabricate a GO-based optical humidity sensor. GO film was coated onto a SU8 polymer channel waveguide using the drop-casting technique. The proposed sensor shows a high TE-mode absorption at 1550 nm. Due to the dependence of the dielectric properties of the GO film on water content, this high TE-mode absorption decreases when the ambient relative humidity increases. The proposed sensor shows a rapid response (<1 s to periodically interrupted humid air flow. The transmission of the proposed sensor shows a linear response of 0.553 dB/% RH in the range of 60% to 100% RH.

All-optical graphene oxide humidity sensors.

Science.gov (United States)

Lim, Weng Hong; Yap, Yuen Kiat; Chong, Wu Yi; Ahmad, Harith

2014-12-17

The optical characteristics of graphene oxide (GO) were explored to design and fabricate a GO-based optical humidity sensor. GO film was coated onto a SU8 polymer channel waveguide using the drop-casting technique. The proposed sensor shows a high TE-mode absorption at 1550 nm. Due to the dependence of the dielectric properties of the GO film on water content, this high TE-mode absorption decreases when the ambient relative humidity increases. The proposed sensor shows a rapid response (<1 s) to periodically interrupted humid air flow. The transmission of the proposed sensor shows a linear response of 0.553 dB/% RH in the range of 60% to 100% RH.

Electrochemical capacitance of nanocomposite films formed by loading carbon nanotubes with ruthenium oxide

Energy Technology Data Exchange (ETDEWEB)

Lee, Jae-Kyung [Department of Chemical Engineering, University of Seoul, 90 Chonnong-dong, Tongdaemun-gu, Seoul (Korea, Republic of); Pathan, Habib M.; Jung, Kwang-Deog; Joo, Oh-Shim [Eco-Nano Research Center, Korea Institute of Science and Technology (KIST), P.O. Box 131, Cheongryang, Seoul (Korea, Republic of)

2006-09-22

This work reports the supercapacitive properties of composite films of multiwalled carbon nanotubes (MWNT) and ruthenium oxide (RuO{sub 2}). Transmission and scanning electron microscopy, cyclic voltammetry, and electrochemical studies revealed that the nanoporous three-dimensional arrangement of RuO{sub 2}-coated MWNT in these films facilitated the improvement of electron and ion transfer relative to MWNT films. The capacitance was measured for films of different RuO{sub 2} loading, revealing specific capacitances per mass as high as 628Fg{sup -1}. The energy storage density of the electrode has increased about three times as compared to MWNT treated with piranha solution. (author)

Effect of noncovalent basal plane functionalization on the quantum capacitance in graphene.

Science.gov (United States)

Ebrish, Mona A; Olson, Eric J; Koester, Steven J

2014-07-09

The concentration-dependent density of states in graphene allows the capacitance in metal-oxide-graphene structures to be tunable with the carrier concentration. This feature allows graphene to act as a variable capacitor (varactor) that can be utilized for wireless sensing applications. Surface functionalization can be used to make graphene sensitive to a particular species. In this manuscript, the effect on the quantum capacitance of noncovalent basal plane functionalization using 1-pyrenebutanoic acid succimidyl ester and glucose oxidase is reported. It is found that functionalized samples tested in air have (1) a Dirac point similar to vacuum conditions, (2) increased maximum capacitance compared to vacuum but similar to air, (3) and quantum capacitance "tuning" that is greater than that in vacuum and ambient atmosphere. These trends are attributed to reduced surface doping and random potential fluctuations as a result of the surface functionalization due to the displacement of H2O on the graphene surface and intercalation of a stable H2O layer beneath graphene that increases the overall device capacitance. The results are important for future application of graphene as a platform for wireless chemical and biological sensors.

Effect of displacement on resistance and capacitance of polyaniline film

International Nuclear Information System (INIS)

Karimov, Khasan Sanginovich; Saeed, Muhammad Tariq; Khalid, Fazal Ahmad; Moiz, Syed Abdul

2011-01-01

This paper investigates the properties of displacement sensors based on polyaniline (PANI) films. About 1 wt% of PANI micropowder is mixed and stirred in a solution of 90 wt% water and 10 wt% alcohol at room temperature. The films of PANI are deposited from solution by drop-casting on Ag electrodes, which are preliminary deposited on glass substrates. The thicknesses of the PANI films are in the range of 20 μm–80 μm. A displacement sensor with polyaniline film as an active material is designed and fabricated. The investigations showed that, on average, the AC resistance of the sensor decreases by 2 times and the capacitance accordingly increases by 1.6 times as the displacement changes in the range of 0 mm–0.5 mm. The polyaniline is the only active material of the displacement sensor. The resistance and capacitance of the PANI changes under the pressure of spring and elastic rubber, and this pressure is created by the downward movement of the micrometer. (general)

Development of a versatile readout and test system and characterization of a capacitively coupled active pixel sensor

Energy Technology Data Exchange (ETDEWEB)

Janssen, Jens; Gonella, Laura; Hemperek, Tomasz; Hirono, Toko; Huegging, Fabian; Krueger, Hans; Wermes, Norbert [Institute of Physics, University of Bonn, Bonn (Germany); Peric, Ivan [Karlsruher Institut fuer Technologie, Karlsruhe (Germany); Collaboration: ATLAS-Collaboration

2015-07-01

With the availability of high voltage and high resistivity CMOS processes, active pixel sensors are becoming increasingly interesting for radiation detection in high energy physics experiments. Although the pixel signal-to-noise ratio and the sensor radiation tolerance were improved, active pixel sensors cannot yet compete with state-of-the-art hybrid pixel detector in a high radiation environment. Hence, active pixel sensors are possible candidates for the outer tracking detector in HEP experiments where production cost plays a role. The investigation of numerous prototyping steps and different technologies is still ongoing and requires a versatile test and readout system, which will be presented in this talk. A capacitively coupled active pixel sensor fabricated in AMS 180 nm high voltage CMOS process is investigated. The sensor is designed to be glued to existing front-end pixel readout chips. Results from the characterization are presented in this talk.

Pressure sensor based on MEMS nano-cantilever beam structure as a heterodielectric gate electrode of dopingless TFET

Science.gov (United States)

Kumar, Gagan; Raman, Ashish

2016-12-01

Micro-electromechanical systems (MEMS) technology has enticed numerous scientists since recent decades particularly in the field of miniaturized-sensors and actuators. Pressure sensor is pivotal component in both of the forerunning fields. The pursuance of a pressure sensor is exigently relying upon its different physical properties i.e. Piezo-resistive, Piezoelectric, Capacitive, Magnetic and Electrostatic. This article presents an outline and scrutiny of the Doping-less Cantilever Based Pressure Sensor using tunnel field effect transistor technology. The propounded pressure sensor based on the principle of capacitive gate coupling, due to which the tunneling current is modified. Additionally, to enhance the affectability of pressure sensor, the work function of metal gate electrode is amended using gas molecule diffusion. Simulation uncovers a phenomenal relationship amongst hypothetical and practical accepts of configuration. The pressure sensor is composed at Silvaco Atlas tool utilizing 40 nm technologies. The performance results exhibit that the proposed model consumes ≤1 mW power and 250 μA tunneling current per nm bending of cantilever beam structure. The inclusive length of the proposed device is 100 nm.

Oxidative stress detection by MEMS cantilever sensor array based electronic nose

Science.gov (United States)

Gupta, Anurag; Singh, T. Sonamani; Singh, Priyanka; Yadava, R. D. S.

2018-05-01

This paper is concerned with analyzing the role of polymer swelling induced surface stress in MEMS chemical sensors. The objective is to determine the impact of surface stress on the chemical discrimination ability of MEMS resonator sensors. We considered a case study of hypoxia detection by MEMS sensor array and performed several types of simulation experiments for detection of oxidative stress volatile organic markers in human breath. Both types of sensor response models that account for the surface stress effect and that did not were considered for the analyses in comparison. It is found that the surface stress (hence the polymer swelling) provides better chemical discrimination ability to polymer coated MEMS sensors.

Classic and Quantum Capacitances in Bernal Bilayer and Trilayer Graphene Field Effect Transistor

Directory of Open Access Journals (Sweden)

Hatef Sadeghi

2013-01-01

Full Text Available Our focus in this study is on characterizing the capacitance voltage (C-V behavior of Bernal stacking bilayer graphene (BG and trilayer graphene (TG as the channel of FET devices. The analytical models of quantum capacitance (QC of BG and TG are presented. Although QC is smaller than the classic capacitance in conventional devices, its contribution to the total metal oxide semiconductor capacitor in graphene-based FET devices becomes significant in the nanoscale. Our calculation shows that QC increases with gate voltage in both BG and TG and decreases with temperature with some fluctuations. However, in bilayer graphene the fluctuation is higher due to its tunable band structure with external electric fields. In similar temperature and size, QC in metal oxide BG is higher than metal oxide TG configuration. Moreover, in both BG and TG, total capacitance is more affected by classic capacitance as the distance between gate electrode and channel increases. However, QC is more dominant when the channel becomes thinner into the nanoscale, and therefore we mostly deal with quantum capacitance in top gate in contrast with bottom gate that the classic capacitance is dominant.

Voltammetric sensor for caffeine based on a glassy carbon electrode modified with Nafion and graphene oxide

International Nuclear Information System (INIS)

Zhao, F.; Wang, F.; Zhao, W.; Zhou, J.; Liu, Y.; Zou, L.; Ye, B.

2011-01-01

We report on a voltammetric sensor for caffeine that is based on a glassy carbon electrode modified with Nafion and graphene oxide (GO). It exhibits a good affinity for caffeine (resulting from the presence of Nafion), and excellent electrochemical response (resulting from the pressence of GO) for the oxidation of caffeine. The electrode enables the determination of caffeine in the range from 4.0 x 10 -7 to 8.0 x 10 -5 mol L -1 , with a detection limit of 2.0 x 10 -7 mol L -1 . The sensor displays good stability, reproducibility, and high sensitivity. It was successfully applied to the quantitative determination of caffeine in beverages. (author)

Capacitive Biosensors and Molecularly Imprinted Electrodes.

Science.gov (United States)

Ertürk, Gizem; Mattiasson, Bo

2017-02-17

Capacitive biosensors belong to the group of affinity biosensors that operate by registering direct binding between the sensor surface and the target molecule. This type of biosensors measures the changes in dielectric properties and/or thickness of the dielectric layer at the electrolyte/electrode interface. Capacitive biosensors have so far been successfully used for detection of proteins, nucleotides, heavy metals, saccharides, small organic molecules and microbial cells. In recent years, the microcontact imprinting method has been used to create very sensitive and selective biorecognition cavities on surfaces of capacitive electrodes. This chapter summarizes the principle and different applications of capacitive biosensors with an emphasis on microcontact imprinting method with its recent capacitive biosensor applications.

An Enhanced Sensing Application Based on a Flexible Projected Capacitive-Sensing Mattress

Directory of Open Access Journals (Sweden)

Wen-Ying Chang

2014-04-01

Full Text Available This paper presents a cost-effective sensor system for mattresses that can classify the sleeping posture of an individual and prevent pressure ulcers. This system applies projected capacitive sensing to the field of health care. The charge time (CT method was used to sensitively and accurately measure the capacitance of the projected electrodes. The required characteristics of the projected capacitor were identified to develop large-area applications for sensory mattresses. The area of the electrodes, the use of shielding, and the increased length of the transmission line were calibrated to more accurately measure the capacitance of the electrodes in large-size applications. To offer the users comfort in the prone position, a flexible substrate was selected and covered with 16 × 20 electrodes. Compared with the static charge sensitive bed (SCSB, our proposed system-flexible projected capacitive-sensing mattress (FPCSM comes with more electrodes to increase the resolution of posture identification. As for the body pressure system (BPS, the FPCSM has advantages such as lower cost, higher aging-resistance capability, and the ability to sense the capacitance of the covered regions without physical contact. The proposed guard ring design effectively absorbs the noise and interrupts leakage paths. The projected capacitive electrode is suitable for proximity-sensing applications and succeeds at quickly recognizing the sleeping pattern of the user.

Graphene oxide-based flexible metal–insulator–metal capacitors

International Nuclear Information System (INIS)

Bag, A; Hota, M K; Mallik, S; Maiti, C K

2013-01-01

This work explores the fabrication of graphene oxide (GO)-based metal–insulator–metal (MIM) capacitors on flexible polyethylene terephthalate (PET) substrates. Electrical properties are studied in detail. A high capacitance density of ∼4 fF µm −2 measured at 1 MHz and permittivity of ∼6 have been obtained. A low voltage coefficient of capacitance, VCC-α, and a low dielectric loss tangent indicate the potential of GO-based MIM capacitors for RF applications. The constant voltage stressing study has shown a high reliability against degradation up to a projected period of 10 years. Degradation in capacitance of the devices on flexible substrates has been studied by bending radius down to 1 cm even up to 6000 times of repeated bending. (paper)

Cannula sensor for nitric oxide detection

Energy Technology Data Exchange (ETDEWEB)

Glazier, S.A. [National Institute of Standard and Technology, Gaithersburg, MD (United States)

1995-12-31

Nitric oxide (NO) has received much attention because of its numerous roles in mammalian systems. It has been found in the brain and nervous system to act as a neurotransmitter, in blood vessels as a blood pressure regulator, in the immune system to act as a bactericide and tumorcide, and in other postulated roles as well. Nitric oxide is produced in mammalian cells by the enzyme nitric oxide synthetase. Once produced, NO is oxidized or reacts rapidly with components in living systems and hence has a short half-life. Only a few sensors have been constructed which can detect NO at nanomolar to micromolar levels found in these systems. We are currently examining the use of a cannula sensor employing oxyhemoglobin for NO detection. This sensor continuously draws in liquid sample at a low rate and immediately reacts it with oxyhemoglobin. The absorbance changes which accompany the reaction are monitored. The sensor has a linear response range from approximately 50 to 1000 nM of NO in aqueous solution. Its utility in monitoring NO produced by stimulated murine macrophage cells (RAW 264.7) in culture is currently being examined. The sensor design is generic in that it can also employ fluorescence and chemiluminescence detection chemistries which may allow lower detection limits to be achieved. Details of the sensor`s performance will be given.

Polypyrrole Porous Micro Humidity Sensor Integrated with a Ring Oscillator Circuit on Chip

Directory of Open Access Journals (Sweden)

De-Hao Lu

2010-11-01

Full Text Available This study presents the design and fabrication of a capacitive micro humidity sensor integrated with a five-stage ring oscillator circuit on chip using the complimentary metal oxide semiconductor (CMOS process. The area of the humidity sensor chip is about 1 mm2. The humidity sensor consists of a sensing capacitor and a sensing film. The sensing capacitor is constructed from spiral interdigital electrodes that can enhance the sensitivity of the sensor. The sensing film of the sensor is polypyrrole, which is prepared by the chemical polymerization method, and the film has a porous structure. The sensor needs a post-CMOS process to coat the sensing film. The post-CMOS process uses a wet etching to etch the sacrificial layers, and then the polypyrrole is coated on the sensing capacitor. The sensor generates a change in capacitance when the sensing film absorbs or desorbs vapor. The ring oscillator circuit converts the capacitance variation of the sensor into the oscillation frequency output. Experimental results show that the sensitivity of the humidity sensor is about 99 kHz/%RH at 25 °C.

A CMOS Luminescence Intensity and Lifetime Dual Sensor Based on Multicycle Charge Modulation.

Science.gov (United States)

Fu, Guoqing; Sonkusale, Sameer R

2018-06-01

Luminescence plays an important role in many scientific and industrial applications. This paper proposes a novel complementary metal-oxide-semiconductor (CMOS) sensor chip that can realize both luminescence intensity and lifetime sensing. To enable high sensitivity, we propose parasitic insensitive multicycle charge modulation scheme for low-light lifetime extraction benefiting from simplicity, accuracy, and compatibility with deeply scaled CMOS process. The designed in-pixel capacitive transimpedance amplifier (CTIA) based structure is able to capture the weak luminescence-induced voltage signal by accumulating photon-generated charges in 25 discrete gated 10-ms time windows and 10-μs pulsewidth. A pinned photodiode on chip with 1.04 pA dark current is utilized for luminescence detection. The proposed CTIA-based circuitry can achieve 2.1-mV/(nW/cm 2 ) responsivity and 4.38-nW/cm 2 resolution at 630 nm wavelength for intensity measurement and 45-ns resolution for lifetime measurement. The sensor chip is employed for measuring time constants and luminescence lifetimes of an InGaN-based white light-emitting diode at different wavelengths. In addition, we demonstrate accurate measurement of the lifetime of an oxygen sensitive chromophore with sensitivity to oxygen concentration of 7.5%/ppm and 6%/ppm in both intensity and lifetime domain. This CMOS-enabled oxygen sensor was then employed to test water quality from different sources (tap water, lakes, and rivers).

Low-Cost Soil Moisture Profile Probe Using Thin-Film Capacitors and a Capacitive Touch Sensor

Directory of Open Access Journals (Sweden)

Yuki Kojima

2016-08-01

Full Text Available Soil moisture is an important property for agriculture, but currently commercialized soil moisture sensors are too expensive for many farmers. The objective of this study is to develop a low-cost soil moisture sensor using capacitors on a film substrate and a capacitive touch integrated circuit. The performance of the sensor was evaluated in two field experiments: a grape field and a mizuna greenhouse field. The developed sensor captured dynamic changes in soil moisture at 10, 20, and 30 cm depth, with a period of 10–14 days required after sensor installation for the contact between capacitors and soil to settle down. The measured soil moisture showed the influence of individual sensor differences, and the influence masked minor differences of less than 0.05 m3·m−3 in the soil moisture at different locations. However, the developed sensor could detect large differences of more than 0.05 m3·m−3, as well as the different magnitude of changes, in soil moisture. The price of the developed sensor was reduced to 300 U.S. dollars and can be reduced even more by further improvements suggested in this study and by mass production. Therefore, the developed sensor will be made more affordable to farmers as it requires low financial investment, and it can be utilized for decision-making in irrigation.

A novel electrochemical sensor based on metal-organic framework for electro-catalytic oxidation of L-cysteine.

Science.gov (United States)

Hosseini, Hadi; Ahmar, Hamid; Dehghani, Ali; Bagheri, Akbar; Tadjarodi, Azadeh; Fakhari, Ali Reza

2013-04-15

A novel electrochemical sensor based on Au-SH-SiO₂ nanoparticles supported on metal-organic framework (Au-SH-SiO₂@Cu-MOF) has been developed for electrocatalytic oxidation and determination of L-cysteine. The Au-SH-SiO₂@Cu-MOF was characterized by scanning electron microscopy, transmission electron microscopy, x-ray diffraction and cyclic voltammetry. The electrochemical behavior of L-cysteine at the Au-SH-SiO₂@Cu-MOF was investigated by cyclic voltammetry. The Au-SH-SiO₂@Cu-MOF showed a very efficient electrocatalytic activity for the oxidation of L-cysteine in 0.1 M phosphate buffer solution (pH 5.0). The oxidation overpotentials of L-cysteine decreased significantly and their oxidation peak currents increased dramatically at Au-SH-SiO₂@Cu-MOF. The potential utility of the sensor was demonstrated by applying it to the analytical determination of L-cysteine concentration. The results showed that the electrocatalytic current increased linearly with the L-cysteine concentration in the range of 0.02-300 μM and the detection limit was 0.008 μM. Finally, the sensor was applied to determine L-cysteine in water and biological samples. Copyright © 2012 Elsevier B.V. All rights reserved.

Switchless charge-discharge circuit for electrical capacitance tomography

International Nuclear Information System (INIS)

Kryszyn, J; Smolik, W T; Radzik, B; Olszewski, T; Szabatin, R

2014-01-01

The main factor limiting the performance of electrical capacitance tomography (ECT) is an extremely low value of inter-electrode capacitances. The charge-discharge circuit is a well suited circuit for a small capacitance measurement due to its immunity to noise and stray capacitance, although it has a problem associated with a charge injected by the analogue switches, which results in a dc offset. This paper presents a new diode-based circuit for capacitance measurement in which a charge transfer method is realized without switches. The circuit was built and tested in one channel configuration with 16 multiplexed electrodes. The performance of the elaborated circuit and a comparison with a classic charge-discharge circuit are presented. The elaborated circuit can be used for sensors with inter-electrode capacitances not lower than 10 fF. The presented approach allows us to obtain a similar performance to the classic charge-discharge circuit, but has a simplified design. A lack of the need to synchronize the analogue switches in the transmitter and the receiver part of this circuit could be a desirable feature in the design of measurement systems integrated with electrodes. (paper)

Label-free detection of sex determining region Y (SRY) via capacitive biosensor

KAUST Repository

Sivashankar, Shilpa

2016-10-20

In this work, we present for the first time, the use of a simple fractal capacitive biosensor for the quantification and detection of sex-determining region Y (SRY) genes. This section of genetic code, which is found on the Y chromosome, finds importance for study as it causes fetuses to develop characteristics of male sex-like gonads when a mutation occurs. It is also an important genetic code in men, and disorders involving the SRY gene can cause infertility and sexual malfunction that lead to a variety of gene mutational disorders. We have therefore designed silicon-based, label-free fractal capacitive biosensors to quantify various proteins and genes. We take advantage of a good dielectric material, Parylene C for enhancing the performance of the sensors. We have integrated these sensors with a simple microchannel for easy handling of fluids on the detection area. The read-out value of an Agilent LCR meter used to measure capacitance of the sensor at a frequency of 1 MHz determined gene specificity and gene quantification. These data revealed that the capacitance measurement of the capacitive biosensor for the SRY gene depended on both the target and the concentration of DNA. The experimental outcomes in the present study can be used to detect DNA and its variations in crucial fields that have a great impact on our daily lives, such as clinical and veterinary diagnostics, industrial and environmental testing and forensic sciences.

Capacitive properties of PANI/MnO{sub 2} synthesized via simultaneous-oxidation route

Energy Technology Data Exchange (ETDEWEB)

Zhang Jie [School of Chemistry and Environment, South China Normal University, Guangzhou 510006 (China); Shu Dong, E-mail: dshu@scnu.edu.cn [School of Chemistry and Environment, South China Normal University, Guangzhou 510006 (China); Tianneng Group, Changxing 313100, Zhejiang Province (China); Base of Production, Education and Research on Energy Storage and Power Battery of Guangdong Higher Education Institutes, Guangzhou 510006 (China); Key Laboratory of Electrochemical Technology on Energy Storage and Power Generation of Guangdong Higher Education Institutes, South China Normal University, Guangzhou 510006 (China); Zhang Tianren [Tianneng Group, Changxing 313100, Zhejiang Province (China); Chen Hongyu [School of Chemistry and Environment, South China Normal University, Guangzhou 510006 (China); Base of Production, Education and Research on Energy Storage and Power Battery of Guangdong Higher Education Institutes, Guangzhou 510006 (China); Key Laboratory of Electrochemical Technology on Energy Storage and Power Generation of Guangdong Higher Education Institutes, South China Normal University, Guangzhou 510006 (China); Zhao Haimin; Wang Yongsheng [Tianneng Group, Changxing 313100, Zhejiang Province (China); Sun Zhenjie; Tang Shaoqing [School of Chemistry and Environment, South China Normal University, Guangzhou 510006 (China); Fang Xueming [Tianneng Group, Changxing 313100, Zhejiang Province (China); Cao Xiufang [School of Chemistry and Environment, South China Normal University, Guangzhou 510006 (China)

2012-08-15

Highlights: Black-Right-Pointing-Pointer PANI/MnO{sub 2} composite was synthesized by the simultaneous-oxidation route. Black-Right-Pointing-Pointer Good contact in inter-molecule level between PANI and MnO{sub 2} improves the conductivity. Black-Right-Pointing-Pointer The separation between PANI and MnO{sub 2} prevents the aggregation of nano-composite. Black-Right-Pointing-Pointer The maximum specific capacitance of the PANI/MnO{sub 2} electrode is 320 F/g. Black-Right-Pointing-Pointer The as-prepared PANI/MnO{sub 2} exhibits excellent cycle stability of 84% capacitance retention after 10,000 cycles. - Abstract: Polyaniline (PANI) and manganese dioxide (MnO{sub 2}) composite (PANI/MnO{sub 2}) was synthesized via a simultaneous-oxidation route. In this route, all reactants were dispersed homogenously in precursor solution and existed as ions and molecules, and involved reactions of ions and molecules generating PANI and MnO{sub 2} simultaneously. In this way, PANI molecule and MnO{sub 2} molecule contact each other and arrange alternately in the composite. The inter-molecule contact improves the conductivity of the composite. The alternative arrangement of PANI molecules and MnO{sub 2} molecules separating each other, and prevents the aggregation of PANI and cluster of MnO{sub 2} so as to decrease the particle size of the composite. The morphology, structure, porous and capacitive properties are characterized by scanning electron microscopy, X-ray diffraction spectroscopy, X-ray photoelectron spectroscopy, Branauer-Emmett-Teller test, thermogravimetric analysis, Fourier transform infrared spectroscopy, cyclic voltammetry, charge-discharge test and the electrochemical impedance measurements. The results show that MnO{sub 2} is predominant in the PANI/MnO{sub 2} composite and the composite exhibits larger specific surface area than pure MnO{sub 2}. The maximum specific capacitance of the composite electrode reaches up to 320 F/g by charge-discharge test, 1.56 times

Contact resistance and overlapping capacitance in flexible sub-micron long oxide thin-film transistors for above 100 MHz operation

Energy Technology Data Exchange (ETDEWEB)

Münzenrieder, Niko, E-mail: muenzenrieder@ife.ee.ethz.ch; Salvatore, Giovanni A.; Petti, Luisa; Zysset, Christoph; Büthe, Lars; Vogt, Christian; Cantarella, Giuseppe; Tröster, Gerhard [Electronics Laboratory Swiss Federal Institute of Technology (ETH) Zürich, Gloriastrasse 35, 8092 Zürich (Switzerland)

2014-12-29

In recent years new forms of electronic devices such as electronic papers, flexible displays, epidermal sensors, and smart textiles have become reality. Thin-film transistors (TFTs) are the basic blocks of the circuits used in such devices and need to operate above 100 MHz to efficiently treat signals in RF systems and address pixels in high resolution displays. Beyond the choice of the semiconductor, i.e., silicon, graphene, organics, or amorphous oxides, the junctionless nature of TFTs and its geometry imply some limitations which become evident and important in devices with scaled channel length. Furthermore, the mechanical instability of flexible substrates limits the feature size of flexible TFTs. Contact resistance and overlapping capacitance are two parasitic effects which limit the transit frequency of transistors. They are often considered independent, while a deeper analysis of TFTs geometry imposes to handle them together; in fact, they both depend on the overlapping length (L{sub OV}) between source/drain and the gate contacts. Here, we conduct a quantitative analysis based on a large number of flexible ultra-scaled IGZO TFTs. Devices with three different values of overlap length and channel length down to 0.5 μm are fabricated to experimentally investigate the scaling behavior of the transit frequency. Contact resistance and overlapping capacitance depend in opposite ways on L{sub OV}. These findings establish routes for the optimization of the dimension of source/drain contact pads and suggest design guidelines to achieve megahertz operation in flexible IGZO TFTs and circuits.

Gas Sensors Based on Tin Oxide Nanoparticles Synthesized from a Mini-Arc Plasma Source

Directory of Open Access Journals (Sweden)

Ganhua Lu

2006-01-01

Full Text Available Miniaturized gas sensors or electronic noses to rapidly detect and differentiate trace amount of chemical agents are extremely attractive. In this paper, we report on the fabrication and characterization of a functional tin oxide nanoparticle gas sensor. Tin oxide nanoparticles are first synthesized using a convenient and low-cost mini-arc plasma source. The nanoparticle size distribution is measured online using a scanning electrical mobility spectrometer (SEMS. The product nanoparticles are analyzed ex-situ by high resolution transmission electron microscopy (HRTEM for morphology and defects, energy dispersive X-ray (EDX spectroscopy for elemental composition, electron diffraction for crystal structure, and X-ray photoelectron spectroscopy (XPS for surface composition. Nonagglomerated rutile tin oxide (SnO2 nanoparticles as small as a few nm have been produced. Larger particles bear a core-shell structure with a metallic core and an oxide shell. The nanoparticles are then assembled onto an e-beam lithographically patterned interdigitated electrode using electrostatic force to fabricate the gas sensor. The nanoparticle sensor exhibits a fast response and a good sensitivity when exposed to 100 ppm ethanol vapor in air.

Capacitance probe for detection of anomalies in non-metallic plastic pipe

Science.gov (United States)

Mathur, Mahendra P.; Spenik, James L.; Condon, Christopher M.; Anderson, Rodney; Driscoll, Daniel J.; Fincham, Jr., William L.; Monazam, Esmail R.

2010-11-23

The disclosure relates to analysis of materials using a capacitive sensor to detect anomalies through comparison of measured capacitances. The capacitive sensor is used in conjunction with a capacitance measurement device, a location device, and a processor in order to generate a capacitance versus location output which may be inspected for the detection and localization of anomalies within the material under test. The components may be carried as payload on an inspection vehicle which may traverse through a pipe interior, allowing evaluation of nonmetallic or plastic pipes when the piping exterior is not accessible. In an embodiment, supporting components are solid-state devices powered by a low voltage on-board power supply, providing for use in environments where voltage levels may be restricted.

Precise measurements of neutral gas temperature using Fiber Bragg Grating sensor in Argon capacitively coupled plasmas

Science.gov (United States)

Han, Daoman; Liu, Zigeng; Liu, Yongxin; Peng, Wei; Wang, Younian

2016-09-01

Neutral gas temperature was measured using Fiber Bragg Grating sensor (FBGs) in capacitively coupled argon plasmas. Thermometry is based on the thermal equilibrium between the sensor and neutral gases, which is found to become faster with increasing pressure. It is also observed that the neutral gas temperature is higher than the room temperature by 10 120 °depending on the experiental conditions, and gas temperature shows significant non-uniformity in space. In addition, radial profiles of neutral temperature at different pressures, resemble these of ion density, obtained by a floating double probe. Specifically, at low pressure, neutral gas temperature and ion density peak at the center of the reactor, while the peak appears at the edge of the electrode at higher pressure. The neutral gas heating is mainly caused by the elastic collisions of Ar + with neutral gas atoms in the sheath region after Ar + gaining a certain energy. This work was supported by the National Natural Science Foundation of China (NSFC) (Grants No. 11335004, 11405018, and 61137005).

Efficient colorimetric pH sensor based on responsive polymer-quantum dot integrated graphene oxide.

Science.gov (United States)

Paek, Kwanyeol; Yang, Hyunseung; Lee, Junhyuk; Park, Junwoo; Kim, Bumjoon J

2014-03-25

In this paper, we report the development of a versatile platform for a highly efficient and stable graphene oxide (GO)-based optical sensor that exhibits distinctive ratiometric color responses. To demonstrate the applicability of the platform, we fabricated a colorimetric, GO-based pH sensor that responds to a wide range of pH changes. Our sensing system is based on responsive polymer and quantum dot (QD) hybrids integrated on a single GO sheet (MQD-GO), with the GO providing an excellent signal-to-noise ratio and high dispersion stability in water. The photoluminescence emissions of the blue and orange color-emitting QDs (BQDs and OQDs) in MQD-GO can be controlled independently by different pH-responsive linkers of poly(acrylic acid) (PAA) (pKa=4.5) and poly(2-vinylpyridine) (P2VP) (pKa=3.0) that can tune the efficiencies of Förster resonance energy transfer from the BQDs to the GO and from the OQDs to the GO, respectively. As a result, the color of MQD-GO changes from orange to near-white to blue over a wide range of pH values. The detailed mechanism of the pH-dependent response of the MQD-GO sensor was elucidated by measurements of time-resolved fluorescence and dynamic light scattering. Furthermore, the MQD-GO sensor showed excellent reversibility and high dispersion stability in pure water, indicating that our system is an ideal platform for biological and environmental applications. Our colorimetric GO-based optical sensor can be expanded easily to various other multifunctional, GO-based sensors by using alternate stimuli-responsive polymers.

Facile preparation of polypyrrole/graphene oxide nanocomposites with large areal capacitance using electrochemical codeposition for supercapacitors

Science.gov (United States)

Zhou, Haihan; Han, Gaoyi; Xiao, Yaoming; Chang, Yunzhen; Zhai, Hua-Jin

2014-10-01

A simple and low-cost electrochemical codeposition method has been introduced to fabricate polypyrrole/graphene oxide (PPy/GO) nanocomposites and the areal capacitance of conducting polymer/GO composites is reported for the first time. Fourier transform infrared spectroscopy (FTIR), Transmission electron microscopy (TEM), X-ray photoelectron spectroscopy (XPS), and X-ray diffraction (XRD) are implemented to determine the PPy/GO nanocomposites are successfully prepared and the interaction between PPy and GO. The as-prepared PPy/GO nanocomposites show the curly sheet-like morphology, superior capacitive behaviors and cyclic stability. Furthermore, the varying deposition time is implemented to investigate the impact of the loading amount on electrochemical behavior of the composites, and a high areal capacitance of 152 mF cm-2 is achieved at 10 mV s-1 CV scan. However, the thicker films caused by the long deposition time would result in larger diffusion resistance of electrolyte ions, consequently exhibit the relatively lower capacitance value at the high current density. The GCD tests indicate moderate deposition time is more suitable for the fast charge/discharge. Considering the very simple and effective synthetic process, the PPy/GO nanocomposites with relatively high areal capacitance are competitive candidate for supercapacitor application, and its capacitive performances can be easily tuned by varying the deposition time.

High-performance symmetric electrochemical capacitor based on graphene foam and nanostructured manganese oxide

Directory of Open Access Journals (Sweden)

Abdulhakeem Bello

2013-08-01

Full Text Available We have fabricated a symmetric electrochemical capacitor with high energy and power densities based on a composite of graphene foam (GF with ∼80 wt% of manganese oxide (MnO2 deposited by hydrothermal synthesis. Raman spectroscopy and X-ray diffraction measurements showed the presence of nanocrystalline MnO2 on the GF, while scanning and transmission electron microscopies showed needle-like manganese oxide coated and anchored onto the surface of graphene. Electrochemical measurements of the composite electrode gave a specific capacitance of 240 Fg−1 at a current density of 0.1 Ag−1 for symmetric supercapacitors using a two-electrode configuration. A maximum energy density of 8.3 Whkg−1 was obtained, with power density of 20 kWkg−1 and no capacitance loss after 1000 cycles. GF is an excellent support for pseudo-capacitive oxide materials such as MnO2, and the composite electrode provided a high energy density due to a combination of double-layer and redox capacitance mechanisms.

Interface Layering Phenomena in Capacitance Detection of DNA with Biochips

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Sandro Carrara

2007-02-01

Full Text Available Reliable DNA detection is of great importance for the development of the Lab-on-chip technology. The effort of the most recent projects on this field is to integrate all necessary operations, such as sample preparation (mixing, PCR amplification together with the sensor user for DNA detection. Among the different ways to sense the DNA hybridization, fluorescence based detection has been favored by the market. However, fluorescence based approaches require that the DNA targets are labeled by means of chromophores. As an alternative label-free DNA detection method, capacitance detection was recently proposed by different authors. While this effect has been successfully demonstrated by several groups, the model used for data analysis is far too simple to describe the real behavior of a DNA sensor. The aim of the present paper is to propose a different electrochemical model to describe DNA capacitance detection.

Comparison of capacitive and inductive sensors designed for partial discharges measurements in electrical power apparatus

Directory of Open Access Journals (Sweden)

Kunicki Michał

2017-01-01

Full Text Available In the paper results of simultaneously conducted measurements achieved using capacitive and inductive sensors are presented according to different PD model sources immersed in a mineral transformer insulation oil. All measurements are preceded under laboratory conditions using typical measurement set up commonly applied for on-site PD detection: measuring impedance and capacitor and high frequency current transformer (HFCT are used respectively. Measuring frequency and voltage level influence as well as phase resolved PD patterns analysis are investigated in the research. Various fundamental PD signal descriptors assigned for selected frequencies are also proposed and compared for chosen sensors. The main purpose of the presented research is to compare PD measurement results achieved using selected type of sensors during laboratory measurements and to point the best application areas in fields of PD detection in high voltage apparatus under normal operating conditions. Furthermore a proper measurement results interpretation coming from different sensors as well as measurement conducting problems and achieved patterns disparities are also discussed in the paper.

Programmable Low-Power Low-Noise Capacitance to Voltage Converter for MEMS Accelerometers.

Science.gov (United States)

Royo, Guillermo; Sánchez-Azqueta, Carlos; Gimeno, Cecilia; Aldea, Concepción; Celma, Santiago

2016-12-30

In this work, we present a capacitance-to-voltage converter (CVC) for capacitive accelerometers based on microelectromechanical systems (MEMS). Based on a fully-differential transimpedance amplifier (TIA), it features a 34-dB transimpedance gain control and over one decade programmable bandwidth, from 75 kHz to 1.2 MHz. The TIA is aimed for low-cost low-power capacitive sensor applications. It has been designed in a standard 0.18-μm CMOS technology and its power consumption is only 54 μW. At the maximum transimpedance configuration, the TIA shows an equivalent input noise of 42 fA/ Hz at 50 kHz, which corresponds to 100 μg/ Hz .

Programmable Low-Power Low-Noise Capacitance to Voltage Converter for MEMS Accelerometers

Directory of Open Access Journals (Sweden)

Guillermo Royo

2016-12-01

Full Text Available In this work, we present a capacitance-to-voltage converter (CVC for capacitive accelerometers based on microelectromechanical systems (MEMS. Based on a fully-differential transimpedance amplifier (TIA, it features a 34-dB transimpedance gain control and over one decade programmable bandwidth, from 75 kHz to 1.2 MHz. The TIA is aimed for low-cost low-power capacitive sensor applications. It has been designed in a standard 0.18-μm CMOS technology and its power consumption is only 54 μW. At the maximum transimpedance configuration, the TIA shows an equivalent input noise of 42 fA/ Hz at 50 kHz, which corresponds to 100 μg/ Hz .

Design of a Humidity Sensor Tag for Passive Wireless Applications.

Science.gov (United States)

Wu, Xiang; Deng, Fangming; Hao, Yong; Fu, Zhihui; Zhang, Lihua

2015-10-07

This paper presents a wireless humidity sensor tag for low-cost and low-power applications. The proposed humidity sensor tag, based on radio frequency identification (RFID) technology, was fabricated in a standard 0.18 μm complementary metal oxide semiconductor (CMOS) process. The top metal layer was deposited to form the interdigitated electrodes, which were then filled with polyimide as the humidity sensing layer. A two-stage rectifier adopts a dynamic bias-voltage generator to boost the effective gate-source voltage of the switches in differential-drive architecture, resulting in a flat power conversion efficiency curve. The capacitive sensor interface, based on phase-locked loop (PLL) theory, employs a simple architecture and can work with 0.5 V supply voltage. The measurement results show that humidity sensor tag achieves excellent linearity, hysteresis and stability performance. The total power-dissipation of the sensor tag is 2.5 μW, resulting in a maximum operating distance of 23 m under 4 W of radiation power of the RFID reader.

Study on effective MOSFET channel length extracted from gate capacitance

Science.gov (United States)

Tsuji, Katsuhiro; Terada, Kazuo; Fujisaka, Hisato

2018-01-01

The effective channel length (L GCM) of metal-oxide-semiconductor field-effect transistors (MOSFETs) is extracted from the gate capacitances of actual-size MOSFETs, which are measured by charge-injection-induced-error-free charge-based capacitance measurement (CIEF CBCM). To accurately evaluate the capacitances between the gate and the channel of test MOSFETs, the parasitic capacitances are removed by using test MOSFETs having various channel sizes and a source/drain reference device. A strong linear relationship between the gate-channel capacitance and the design channel length is obtained, from which L GCM is extracted. It is found that L GCM is slightly less than the effective channel length (L CRM) extracted from the measured MOSFET drain current. The reason for this is discussed, and it is found that the capacitance between the gate electrode and the source and drain regions affects this extraction.

A CMOS micromachined capacitive tactile sensor with integrated readout circuits and compensation of process variations.

Science.gov (United States)

Tsai, Tsung-Heng; Tsai, Hao-Cheng; Wu, Tien-Keng

2014-10-01

This paper presents a capacitive tactile sensor fabricated in a standard CMOS process. Both of the sensor and readout circuits are integrated on a single chip by a TSMC 0.35 μm CMOS MEMS technology. In order to improve the sensitivity, a T-shaped protrusion is proposed and implemented. This sensor comprises the metal layer and the dielectric layer without extra thin film deposition, and can be completed with few post-processing steps. By a nano-indenter, the measured spring constant of the T-shaped structure is 2.19 kNewton/m. Fully differential correlated double sampling capacitor-to-voltage converter (CDS-CVC) and reference capacitor correction are utilized to compensate process variations and improve the accuracy of the readout circuits. The measured displacement-to-voltage transductance is 7.15 mV/nm, and the sensitivity is 3.26 mV/μNewton. The overall power dissipation is 132.8 μW.

Resonant Magnetic Field Sensors Based On MEMS Technology

Directory of Open Access Journals (Sweden)

Elías Manjarrez

2009-09-01

Full Text Available Microelectromechanical systems (MEMS technology allows the integration of magnetic field sensors with electronic components, which presents important advantages such as small size, light weight, minimum power consumption, low cost, better sensitivity and high resolution. We present a discussion and review of resonant magnetic field sensors based on MEMS technology. In practice, these sensors exploit the Lorentz force in order to detect external magnetic fields through the displacement of resonant structures, which are measured with optical, capacitive, and piezoresistive sensing techniques. From these, the optical sensing presents immunity to electromagnetic interference (EMI and reduces the read-out electronic complexity. Moreover, piezoresistive sensing requires an easy fabrication process as well as a standard packaging. A description of the operation mechanisms, advantages and drawbacks of each sensor is considered. MEMS magnetic field sensors are a potential alternative for numerous applications, including the automotive industry, military, medical, telecommunications, oceanographic, spatial, and environment science. In addition, future markets will need the development of several sensors on a single chip for measuring different parameters such as the magnetic field, pressure, temperature and acceleration.

Resonant Magnetic Field Sensors Based On MEMS Technology

Science.gov (United States)

Herrera-May, Agustín L.; Aguilera-Cortés, Luz A.; García-Ramírez, Pedro J.; Manjarrez, Elías

2009-01-01

Microelectromechanical systems (MEMS) technology allows the integration of magnetic field sensors with electronic components, which presents important advantages such as small size, light weight, minimum power consumption, low cost, better sensitivity and high resolution. We present a discussion and review of resonant magnetic field sensors based on MEMS technology. In practice, these sensors exploit the Lorentz force in order to detect external magnetic fields through the displacement of resonant structures, which are measured with optical, capacitive, and piezoresistive sensing techniques. From these, the optical sensing presents immunity to electromagnetic interference (EMI) and reduces the read-out electronic complexity. Moreover, piezoresistive sensing requires an easy fabrication process as well as a standard packaging. A description of the operation mechanisms, advantages and drawbacks of each sensor is considered. MEMS magnetic field sensors are a potential alternative for numerous applications, including the automotive industry, military, medical, telecommunications, oceanographic, spatial, and environment science. In addition, future markets will need the development of several sensors on a single chip for measuring different parameters such as the magnetic field, pressure, temperature and acceleration. PMID:22408480

Flexible Pressure Sensor with Ag Wrinkled Electrodes Based on PDMS Substrate

Directory of Open Access Journals (Sweden)

Jianli Cui

2016-12-01

Full Text Available Flexible pressure sensors are essential components of electronic skins for future attractive applications ranging from human healthcare monitoring to biomedical diagnostics, robotic skins, and prosthetic limbs. Here we report a new kind of flexible pressure sensor. The sensors are capacitive, and composed of two Ag wrinkled electrodes separated by a carbon nanotubes (CNTs/polydimethylsiloxane (PDMS composite deformable dielectric layer. Ag wrinkled electrodes were formed by vacuum deposition on top of pre-strained and relaxed PDMS substrates which were treated using an O2 plasma, a surface functionalization process, and a magnetron sputtering process. Ultimately, the developed sensor exhibits a maximum sensitivity of 19.80% kPa−1 to capacitance, great durability over 500 cycles, and rapid mechanical responses (<200 ms. We also demonstrate that our sensor can be used to effectively detect the location and distribution of finger pressure.

Surface passivation function of indium-tin-oxide-based nanorod structural sensors

International Nuclear Information System (INIS)

Lin, Tzu-Shun; Lee, Ching-Ting; Lee, Hisn-Ying; Lin, Chih-Chien

2012-01-01

Employing self-shadowing traits of an oblique-angle electron-beam deposition system, various indium tin oxide (ITO) nanorod arrays were deposited on a silicon substrate and used as extended-gate field-effect-transistor (EGFET) pH sensors. The length and morphology of the deposited ITO nanorod arrays could be changed and controlled under different deposition conditions. The ITO nanorod structural EGFET pH sensors exhibited high sensing performances owing to the larger sensing surface area. The sensitivity of the pH sensors with 150-nm-length ITO nanorod arrays was 53.96 mV/pH. By using the photoelectrochemical treatment of the ITO nanorod arrays, the sensitivity of the pH sensors with 150-nm-length passivated ITO nanorod arrays was improved to 57.21 mV/pH.

CMOS Cell Sensors for Point-of-Care Diagnostics

Science.gov (United States)

Adiguzel, Yekbun; Kulah, Haluk

2012-01-01

The burden of health-care related services in a global era with continuously increasing population and inefficient dissipation of the resources requires effective solutions. From this perspective, point-of-care diagnostics is a demanded field in clinics. It is also necessary both for prompt diagnosis and for providing health services evenly throughout the population, including the rural districts. The requirements can only be fulfilled by technologies whose productivity has already been proven, such as complementary metal-oxide-semiconductors (CMOS). CMOS-based products can enable clinical tests in a fast, simple, safe, and reliable manner, with improved sensitivities. Portability due to diminished sensor dimensions and compactness of the test set-ups, along with low sample and power consumption, is another vital feature. CMOS-based sensors for cell studies have the potential to become essential counterparts of point-of-care diagnostics technologies. Hence, this review attempts to inform on the sensors fabricated with CMOS technology for point-of-care diagnostic studies, with a focus on CMOS image sensors and capacitance sensors for cell studies. PMID:23112587

A piezoelectric micro control valve with integrated capacitive sensing for ambulant blood pressure waveform monitoring

Science.gov (United States)

Groen, Maarten S.; Wu, Kai; Brookhuis, Robert A.; van Houwelingen, Marc J.; Brouwer, Dannis M.; Lötters, Joost C.; Wiegerink, Remco J.

2014-12-01

We have designed and characterized a MEMS microvalve with built-in capacitive displacement sensing and fitted it with a miniature piezoelectric actuator to achieve active valve control. The integrated displacement sensor enables high bandwidth proportional control of the gas flow through the valve. This is an essential requirement for non-invasive blood pressure waveform monitoring based on following the arterial pressure with a counter pressure. Using the capacitive sensor, we demonstrate negligible hysteresis in the valve control characteristics. Fabrication of the valve requires only two mask steps for deep reactive ion etching (DRIE) and one release etch.

A piezoelectric micro control valve with integrated capacitive sensing for ambulant blood pressure waveform monitoring

International Nuclear Information System (INIS)

Groen, Maarten S; Wu, Kai; Brookhuis, Robert A; Lötters, Joost C; Wiegerink, Remco J; Van Houwelingen, Marc J; Brouwer, Dannis M

2014-01-01

We have designed and characterized a MEMS microvalve with built-in capacitive displacement sensing and fitted it with a miniature piezoelectric actuator to achieve active valve control. The integrated displacement sensor enables high bandwidth proportional control of the gas flow through the valve. This is an essential requirement for non-invasive blood pressure waveform monitoring based on following the arterial pressure with a counter pressure. Using the capacitive sensor, we demonstrate negligible hysteresis in the valve control characteristics. Fabrication of the valve requires only two mask steps for deep reactive ion etching (DRIE) and one release etch. (paper)

An inverse-modelling approach for frequency response correction of capacitive humidity sensors in ABL research with small remotely piloted aircraft (RPA)

Science.gov (United States)

Wildmann, N.; Kaufmann, F.; Bange, J.

2014-09-01

The measurement of water vapour concentration in the atmosphere is an ongoing challenge in environmental research. Satisfactory solutions exist for ground-based meteorological stations and measurements of mean values. However, carrying out advanced research of thermodynamic processes aloft as well, above the surface layer and especially in the atmospheric boundary layer (ABL), requires the resolution of small-scale turbulence. Sophisticated optical instruments are used in airborne meteorology with manned aircraft to achieve the necessary fast-response measurements of the order of 10 Hz (e.g. LiCor 7500). Since these instruments are too large and heavy for the application on small remotely piloted aircraft (RPA), a method is presented in this study that enhances small capacitive humidity sensors to be able to resolve turbulent eddies of the order of 10 m. The sensor examined here is a polymer-based sensor of the type P14-Rapid, by the Swiss company Innovative Sensor Technologies (IST) AG, with a surface area of less than 10 mm2 and a negligible weight. A physical and dynamical model of this sensor is described and then inverted in order to restore original water vapour fluctuations from sensor measurements. Examples of flight measurements show how the method can be used to correct vertical profiles and resolve turbulence spectra up to about 3 Hz. At an airspeed of 25 m s-1 this corresponds to a spatial resolution of less than 10 m.

Inverter-based successive approximation capacitance-to-digital converter

KAUST Repository

Omran, Hesham

2017-03-23

An energy-efficient capacitance-to-digital converter (CDC) is provided that utilizes a capacitance-domain successive approximation (SAR) technique. Unlike SAR analog- to-digital converters (ADCs), analysis shows that for SAR CDCs, the comparator offset voltage will result in signal-dependent and parasitic-dependent conversion errors, which necessitates an op-amp-based implementation. The inverter-based SAR CDC contemplated herein provides robust, energy-efficient, and fast operation. The inverter- based SAR CDC may include a hybrid coarse-fine programmable capacitor array. The design of example embodiments is insensitive to analog references, and thus achieves very low temperature sensitivity without the need for calibration. Moreover, this design achieves improved energy efficiency.

In-situ polymerization of polyaniline on the surface of graphene oxide for high electrochemical capacitance

International Nuclear Information System (INIS)

Li, Xinlu; Zhong, Qineng; Zhang, Xinlin; Li, Tongtao; Huang, Jiamu

2015-01-01

Conducting polymer polyaniline (PANI) was in-situ polymerized on the surface of graphene oxide (GO) to form PANI encapsulating GO nanocomposites. The morphology and microstructure were examined by scanning electron microscopy, X-ray diffraction and N 2 absorption/desorption analysis. Electrochemical properties were tested by cyclic voltammetry, galvanostatic charge/discharge cycles and electrochemical impedance spectroscopy. Experimental results showed that ethanol assisted the dispersion of GO in water and facilitated the diffusion of polymer monomers on GO. GO as a support material can provide sufficient reaction sites for the deposition of aniline to form the film-like GO/PANI composites. Capacitive performance illustrated that the in-situ polymerization of PANI on GO was effective in improving the specific capacitance and cycling stability. - Highlights: • GO/PANI nanocomposites were achieved by in-situ polymerization. • PANI was uniformly coated on the surface of GO with addition of ethanol. • GO/PANI show high specific capacitance and cycling stability

Compensation of the detector capacitance presented to charge-sensitive preamplifiers using the Miller effect

Energy Technology Data Exchange (ETDEWEB)

Kwon, Inyong, E-mail: iykwon@umich.edu [University of Michigan, Ann Arbor, MI (United States); Kang, Taehoon, E-mail: thnkang@umich.edu [University of Michigan, Ann Arbor, MI (United States); Wells, Byron T., E-mail: wells@galtresearch.com [Galt LLC, Ypsilanti, MI (United States); D’Aries, Lawrence J., E-mail: lawrence.j.daries.civ@mail.mil [Picatinny Arsenal, Rockaway Township, NJ (United States); Hammig, Mark D., E-mail: hammig@umich.edu [University of Michigan, Ann Arbor, MI (United States)

2015-06-01

This paper describes an integrated circuit design for a modified charge-sensitive amplifier (CSA) that compensates for the effect of capacitance presented by nuclear radiation detectors and other sensors. For applications that require large area semiconductor detectors or for those semiconductor sensors derived from high permittivity materials such as PbSe, the detector capacitance can degrade the system gain and bandwidth of a front-end preamplifier, resulting in extended rise times and attenuated output voltage signals during pulse formation. In order to suppress the effect of sensor capacitance, we applied a bootstrap technique into a traditional CSA. The technique exploits the Miller effect by reducing the effective voltage difference between the two sides of a radiation detector which minimizes the capacitance presented to the differential common-source amplifier. This new configuration is successfully designed to produce effective gain even at high detector capacitance. The entire circuit, including a core CSA with feedback components and a bootstrap amplifier, are implemented in a 0.18 μm CMOS process with a 3.3 V supply voltage. - Highlights: • A modified CSA was implemented for detector capacitance compensation. • Increasing detector capacitance degrades gain and rise time. • A bootstrap amplifier exploiting the Miller effect is described. • It allows using large area radiation sensors for high radiation-interaction rates. • Intensive noise analyses show that SNR is much better with the technique.

Solar Cell Capacitance Determination Based on an RLC Resonant Circuit

Directory of Open Access Journals (Sweden)

Petru Adrian Cotfas

2018-03-01

Full Text Available The capacitance is one of the key dynamic parameters of solar cells, which can provide essential information regarding the quality and health state of the cell. However, the measurement of this parameter is not a trivial task, as it typically requires high accuracy instruments using, e.g., electrical impedance spectroscopy (IS. This paper introduces a simple and effective method to determine the electric capacitance of the solar cells. An RLC (Resistor Inductance Capacitor circuit is formed by using an inductor as a load for the solar cell. The capacitance of the solar cell is found by measuring the frequency of the damped oscillation that occurs at the moment of connecting the inductor to the solar cell. The study is performed through simulation based on National Instruments (NI Multisim application as SPICE simulation software and through experimental capacitance measurements of a monocrystalline silicon commercial solar cell and a photovoltaic panel using the proposed method. The results were validated using impedance spectroscopy. The differences between the capacitance values obtained by the two methods are of 1% for the solar cells and of 9.6% for the PV panel. The irradiance level effect upon the solar cell capacitance was studied obtaining an increase in the capacitance in function of the irradiance. By connecting different inductors to the solar cell, the frequency effect upon the solar cell capacitance was studied noticing a very small decrease in the capacitance with the frequency. Additionally, the temperature effect over the solar cell capacitance was studied achieving an increase in capacitance with temperature.

Selective hydrogen detection at high temperature by using yttria-stabilized zirconia-based sensor with coupled metal-oxide-based sensing electrodes

International Nuclear Information System (INIS)

Yamaguchi, Mami; Anggraini, Sri Ayu; Fujio, Yuki; Breedon, Michael; Plashnitsa, Vladimir V.; Miura, Norio

2012-01-01

A selective and sensitive hydrogen (H 2 ) sensor capable of working at a high operating temperature was developed by using a pair of metal-oxide-based SEs formed on a yttria-stabilized zirconia (YSZ) tube, operating as a mixed-potential type sensor. The utilization of SnO 2 (+30 wt.% YSZ) electrode together with NiO-TiO 2 electrode configured as a combined-type sensor, successfully diminished the response of the examined interfering gases (especially propene), while maintaining high response toward H 2 at an operating temperature of 600 °C under humid operating conditions. The developed sensor exhibited quick response to 100 ppm H 2 , as the 90% response time was observed to be 9 s. The sensing performance of the combined-type sensor was barely affected by changes in water vapor concentration within the range of 1–4 vol.%, suggesting the resilience of the sensor to function in realistic working conditions. This sensor exhibited a linear relationship between sensitivity and H 2 concentration on a logarithmic scale.

THE GAS SENSORS BASED ON ZINC OXIDE (THE REVIEW)

OpenAIRE

Bugayova, M. E.; Koval, V. M.; Lashkarev, G. V.; Lazorenko, V. I.; Karpina, V. A.; Khranovskyy, V. D.

2017-01-01

The wide range of gas sensor application, in particular, in a mining industry for detection of outflow of gases, the control of gas emissions over an atmosphere at the industrial enterprises, in housing and communal services, in home appliances makes actual the review. As the systematized analysis of gas sensor based on ZnO has not being carried out — this work is of interest for development of chemical sensors based on zinc compound with high sensitivity, selectivity and stability. The resis...

A selective glucose sensor based on direct oxidation on a bimetal catalyst with a molecular imprinted polymer.

Science.gov (United States)

Cho, Seong Je; Noh, Hui-Bog; Won, Mi-Sook; Cho, Chul-Ho; Kim, Kwang Bok; Shim, Yoon-Bo

2018-01-15

A selective nonenzymatic glucose sensor was developed based on the direct oxidation of glucose on hierarchical CuCo bimetal-coated with a glucose-imprinted polymer (GIP). Glucose was introduced into the GIP composed of Nafion and polyurethane along with aminophenyl boronic acid (APBA), which was formed on the bimetal electrode formed on a screen-printed electrode. The extraction of glucose from the GIP allowed for the selective permeation of glucose into the bimetal electrode surface for oxidation. The GIP-coated bimetal sensor probe was characterized using electrochemical and surface analytical methods. The GIP layer coated on the NaOH pre-treated bimetal electrode exhibited a dynamic range between 1.0µM and 25.0mM with a detection limit of 0.65±0.10µM in phosphate buffer solution (pH 7.4). The anodic responses of uric acid, acetaminophen, dopamine, ascorbic acid, L-cysteine, and other saccharides (monosaccharides: galactose, mannose, fructose, and xylose; disaccharides: sucrose, lactose, and maltose) were not detected using the GIP-coated bimetal sensor. The reliability of the sensor was evaluated by the determination of glucose in artificial and whole blood samples. Copyright © 2017 Elsevier B.V. All rights reserved.

The interfacial capacitance of an oxidised polycrystalline gold electrode in an aqueous HClO4 electrolyte

International Nuclear Information System (INIS)

Grdeń, M.

2013-01-01

The interfacial capacitance of a polycrystalline gold electrode electrochemically oxidised in an aqueous 0.1 M HClO 4 electrolyte has been investigated by means of the electrochemical impedance spectroscopy. From 1.3 to 3 monolayers of Au atoms were oxidised under constant potential conditions and for various oxidation times. The capacitance of the oxidised layers was analysed as a function of the electrode potential and the extent of the surface oxidation. It was found that the interfacial capacitance decreases upon surface oxidation. The components of the interfacial capacitance of the oxidised layer: the double layer capacitance and the capacitance of the oxidised layer; have been separated. The capacitance of the double layer of the oxidised surface was found to be comparable to the capacitance measured for the metallic surface. - Highlights: • The impedance spectra for thin layers of Au oxides/hydroxides were acquired. • Separate determination of the double layer and the oxide capacitances of oxidised Au • The double layer capacitances of oxidised and non-oxidised Au surfaces are comparable

Structure and Fabrication of a Microscale Flow-Rate/Skin Friction Sensor

Science.gov (United States)

Chandrasekharan, Vijay (Inventor); Sells, Jeremy (Inventor); Sheplak, Mark (Inventor); Arnold, David P. (Inventor)

2014-01-01

A floating element shear sensor and method for fabricating the same are provided. According to an embodiment, a microelectromechanical systems (MEMS)-based capacitive floating element shear stress sensor is provided that can achieve time-resolved turbulence measurement. In one embodiment, a differential capacitive transduction scheme is used for shear stress measurement. The floating element structure for the differential capacitive transduction scheme incorporates inter digitated comb fingers forming differential capacitors, which provide electrical output proportional to the floating element deflection.

Applications of pressure-sensitive dielectric elastomer sensors

Science.gov (United States)

Böse, Holger; Ocak, Deniz; Ehrlich, Johannes

2016-04-01

Dielectric elastomer sensors for the measurement of compression loads with high sensitivity are described. The basic design of the sensors exhibits two profiled surfaces between which an elastomer film is confined. All components of the sensor were prepared with silicone whose stiffness can be varied in a wide range. Depending on details of the sensor design, various effects contribute to the enhancement of the capacitance. The intermediate elastomer film is stretched upon compression and electrode layers on the elastomer profiles and in the elastomer film approach each other. Different designs of the pressure sensor give rise to very different sensor characteristics in terms of the dependence of electric capacitance on compression force. Due to their inherent flexibility, the pressure sensors can be used on compliant substrates such as seats or beds or on the human body. This gives rise to numerous possible applications. The contribution describes also some examples of possible sensor applications. A glove was equipped with various sensors positioned at the finger tips. When grabbing an object with the glove, the sensors can detect the gripping forces of the individual fingers with high sensitivity. In a demonstrator of the glove equipped with seven sensors, the capacitances representing the gripping forces are recorded on a display. In another application example, a lower limb prosthesis was equipped with a pressure sensor to detect the load on the remaining part of the leg and the load is displayed in terms of the measured capacitance. The benefit of such sensors is to detect an eventual overload in order to prevent possible pressure sores. A third example introduces a seat load sensor system based on four extended pressure sensor mats. The sensor system detects the load distribution of a person on the seat. The examples emphasize the high performance of the new pressure sensor technology.

Study and optimisation of manganese oxide-based electrodes for electrochemical supercapacitors

Energy Technology Data Exchange (ETDEWEB)

Staiti, P.; Lufrano, F. [CNR-ITAE, Istituto di Tecnologie Avanzate per l' Energia ' ' Nicola Giordano' ' , Via Salita S. Lucia n. 5, 98126 S. Lucia, Messina (Italy)

2009-02-01

A manganese oxide material was synthesised by an easy precipitation method based on reduction of potassium permanganate(VII) with a manganese(II) salt. The material was treated at different temperatures to study the effect of thermal treatment on capacitive property. The best capacitive performance was obtained with the material treated at 200 C. This material was used to prepare electrodes with different amounts of polymer binder, carbon black and graphite fibres to individuate the optimal composition that gave the best electrochemical performances. It was found that graphite fibres improve the electrochemical performance of electrodes. The highest specific capacitance (267 F g{sup -1} MnO{sub x}) was obtained with an electrode containing 70% of MnO{sub x}, 15% of carbon black, 10% of graphite fibres and 5% of PVDF. This electrode, with CB/GF ratio of 1.5, showed a higher utilization of manganese oxide. The results reported in the present paper further confirmed that manganese oxide is a very interesting material for supercapacitor application. (author)

Development and sintering of alumina based mixed oxide ceramic products for sensor applications in petroleum industries

Energy Technology Data Exchange (ETDEWEB)

Yadava, Y.P.; Muniz, L.B.; Aguiar, L.A.R.; Sanguinetti Ferreira, R.A. [Departamento de Engenharia Mecanica, Universidade Federal de Pernambuco, CEP 50741-530, Recife-PE (Brazil); Albino Aguiar, J. [Departamento de Fisica, Universidade Federal de Pernambuco, CEP 50670-901 Recife-PE (Brazil)

2005-07-01

In petroleum production, different types of sensors are required to monitor temperature, pressure, leakage of inflammable gases, etc. These sensors work in very hostile environmental conditions and frequently suffer from abrasion and corrosion problems. Presently perovskite oxide based ceramic materials are increasingly being used for such purposes, due to their highly inert behavior in hostile environment. In the present work, we have developed and characterized alumina based complex perovskite oxide ceramics, Ba{sub 2}AlSnO{sub 5.5}. These ceramics were prepared by solid state reaction process and produced in the form of circular discs by uniaxial pressure compaction technique. Green ceramic bodies were sintered at different sintering temperatures (1200 to 1500 deg. C) in air atmosphere. Structural and microstructural characteristics of sintered Ba{sub 2}AlMO{sub 5.5} were studied by XRD and SEM techniques. Mechanical properties were tested by Vickers microhardness tests. Ceramics sintered in the temperature range 1300 deg. C 1400 deg. C presented best results in terms of microstructural characteristics and mechanical performance. (authors)

Effect of oxidation of carbon material on suspension electrodes for flow electrode capacitive deionization.

Science.gov (United States)

Hatzell, Kelsey B; Hatzell, Marta C; Cook, Kevin M; Boota, Muhammad; Housel, Gabrielle M; McBride, Alexander; Kumbur, E Caglan; Gogotsi, Yury

2015-03-03

Flow electrode deionization (FCDI) is an emerging area for continuous and scalable deionization, but the electrochemical and flow properties of the flow electrode need to be improved to minimize energy consumption. Chemical oxidation of granular activated carbon (AC) was examined here to study the role of surface heteroatoms on rheology and electrochemical performance of a flow electrode (carbon slurry) for deionization processes. Moreover, it was demonstrated that higher mass densities could be used without increasing energy for pumping when using oxidized active material. High mass-loaded flow electrodes (28% carbon content) based on oxidized AC displayed similar viscosities (∼21 Pa s) to lower mass-loaded flow electrodes (20% carbon content) based on nonoxidized AC. The 40% increased mass loading (from 20% to 28%) resulted in a 25% increase in flow electrode gravimetric capacitance (from 65 to 83 F g(-1)) without sacrificing flowability (viscosity). The electrical energy required to remove ∼18% of the ions (desalt) from of the feed solution was observed to be significantly dependent on the mass loading and decreased (∼60%) from 92 ± 7 to 28 ± 2.7 J with increased mass densities from 5 to 23 wt %. It is shown that the surface chemistry of the active material in a flow electrode effects the electrical and pumping energy requirements of a FCDI system.

Instrumentation to Measure the Capacitance of Biosensors by Sinusoidal Wave Method

Directory of Open Access Journals (Sweden)

Pavan Kumar KATHUROJU

2009-09-01

Full Text Available Micro Controller based instrumentation to measure the capacitance of biosensors is developed. It is based on frequency domain technique with sinusoidal wave input. Changes in the capacitance of biosensor because of the analyte specific reaction are calculated by knowing the current flowing through the sample. A dedicated 8-bit microcontroller (AT89C52 and its associated peripherals are employed for the hardware and application specific software is developed in ‘C’ language. The paper describes the methodology, instrumentation details along with a specific application to glucose sensing. The measurements are conducted with glucose oxidase based capacitance biosensor and the obtained results are compared with the conventional method of sugar measurements using the UV-Visible spectroscopy (Phenol-Sulphuric acid assay method. Measurement accuracy of the instrument is found to be ± 5 %. Experiments are conducted on glucose sensor with different bias voltages. It is found that for bias voltages varying from 0.5 to 0.7 Volt, the measurements are good for this application.

Humidity Sensors Printed on Recycled Paper and Cardboard

Directory of Open Access Journals (Sweden)

Matija Mraović

2014-07-01

Full Text Available Research, design, fabrication and results of various screen printed capacitive humidity sensors is presented in this paper. Two types of capacitive humidity sensors have been designed and fabricated via screen printing on recycled paper and cardboard, obtained from the regional paper and cardboard industry. As printing ink, commercially available silver nanoparticle-based conductive ink was used. A considerable amount of work has been devoted to the humidity measurement methods using paper as a dielectric material. Performances of different structures have been tested in a humidity chamber. Relative humidity in the chamber was varied in the range of 35%–80% relative humidity (RH at a constant temperature of 23 °C. Parameters of interest were capacitance and conductance of each sensor material, as well as long term behaviour. Process reversibility has also been considered. The results obtained show a mainly logarithmic response of the paper sensors, with the only exception being cardboard-based sensors. Recycled paper-based sensors exhibit a change in value of three orders of magnitude, whereas cardboard-based sensors have a change in value of few 10s over the entire scope of relative humidity range (RH 35%–90%. Two different types of capacitor sensors have been investigated: lateral (comb type sensors and modified, perforated flat plate type sensors. The objective of the present work was to identify the most important factors affecting the material performances with humidity, and to contribute to the development of a sensor system supported with a Radio Frequency Identification (RFID chip directly on the material, for use in smart packaging applications. Therefore, the authors built a passive and a battery-supported wireless module based on SL900A smart sensory tag’s IC to achieve UHF-RFID functionality with data logging capability.

A Solution-Based Temperature Sensor Using the Organic Compound CuTsPc

Directory of Open Access Journals (Sweden)

Shahino Mah Abdullah

2014-06-01

Full Text Available An electrochemical cell using an organic compound, copper (II phthalocyanine-tetrasulfonic acid tetrasodium salt (CuTsPc, has been fabricated and investigated as a solution-based temperature sensor. The capacitance and resistance of the ITO/CuTsPc solution/ITO chemical cell has been characterized as a function of temperature in the temperature range of 25–80 °C. A linear response with minimal hysteresis is observed. The fabricated temperature sensor has shown high consistency and sensitive response towards a specific range of temperature values.

Alcohol vapor sensing by cadmium-doped zinc oxide thick films based chemical sensor

Science.gov (United States)

Zargar, R. A.; Arora, M.; Chackrabarti, S.; Ahmad, S.; Kumar, J.; Hafiz, A. K.

2016-04-01

Cadmium-doped zinc oxide nanoparticles were derived by simple chemical co-precipitation route using zinc acetate dihydrate and cadmium acetate dihydrate as precursor materials. The thick films were casted from chemical co-precipitation route prepared nanoparticles by economic facile screen printing method. The structural, morphological, optical and electrical properties of the film were characterized relevant to alcohol vapor sensing application by powder XRD, SEM, UV-VIS and DC conductivity techniques. The response and sensitivity of alcohol (ethanol) vapor sensor are obtained from the recovery curves at optimum working temperature range from 20∘C to 50∘C. The result shows that maximum sensitivity of the sensor is observed at 25∘C operating temperature. On varying alcohol vapor concentration, minor variation in resistance has been observed. The sensing mechanism of sensor has been described in terms of physical adsorption and chemical absorption of alcohol vapors on cadmium-doped zinc oxide film surface and inside film lattice network through weak hydrogen bonding, respectively.

Toward CMOS image sensor based glucose monitoring.

Science.gov (United States)

Devadhasan, Jasmine Pramila; Kim, Sanghyo

2012-09-07

Complementary metal oxide semiconductor (CMOS) image sensor is a powerful tool for biosensing applications. In this present study, CMOS image sensor has been exploited for detecting glucose levels by simple photon count variation with high sensitivity. Various concentrations of glucose (100 mg dL(-1) to 1000 mg dL(-1)) were added onto a simple poly-dimethylsiloxane (PDMS) chip and the oxidation of glucose was catalyzed with the aid of an enzymatic reaction. Oxidized glucose produces a brown color with the help of chromogen during enzymatic reaction and the color density varies with the glucose concentration. Photons pass through the PDMS chip with varying color density and hit the sensor surface. Photon count was recognized by CMOS image sensor depending on the color density with respect to the glucose concentration and it was converted into digital form. By correlating the obtained digital results with glucose concentration it is possible to measure a wide range of blood glucose levels with great linearity based on CMOS image sensor and therefore this technique will promote a convenient point-of-care diagnosis.

Understanding the Potential of WO3 Based Sensors for Breath Analysis

Science.gov (United States)

Staerz, Anna; Weimar, Udo; Barsan, Nicolae

2016-01-01

Tungsten trioxide is the second most commonly used semiconducting metal oxide in gas sensors. Semiconducting metal oxide (SMOX)-based sensors are small, robust, inexpensive and sensitive, making them highly attractive for handheld portable medical diagnostic detectors. WO3 is reported to show high sensor responses to several biomarkers found in breath, e.g., acetone, ammonia, carbon monoxide, hydrogen sulfide, toluene, and nitric oxide. Modern material science allows WO3 samples to be tailored to address certain sensing needs. Utilizing recent advances in breath sampling it will be possible in the future to test WO3-based sensors in application conditions and to compare the sensing results to those obtained using more expensive analytical methods. PMID:27801881

Eraser-based eco-friendly fabrication of a skin-like large-area matrix of flexible carbon nanotube strain and pressure sensors.

Science.gov (United States)

Sahatiya, Parikshit; Badhulika, Sushmee

2017-03-03

This paper reports a new type of electronic, recoverable skin-like pressure and strain sensor, produced on a flexible, biodegradable pencil-eraser substrate and fabricated using a solvent-free, low-cost and energy efficient process. Multi-walled carbon nanotube (MWCNT) film, the strain sensing element, was patterned on pencil eraser with a rolling pin and a pre-compaction mechanical press. This induces high interfacial bonding between the MWCNTs and the eraser substrate, which enables the sensor to achieve recoverability under ambient conditions. The eraser serves as a substrate for strain sensing, as well as acting as a dielectric for capacitive pressure sensing, thereby eliminating the dielectric deposition step, which is crucial in capacitive-based pressure sensors. The strain sensing transduction mechanism is attributed to the tunneling effect, caused by the elastic behavior of the MWCNTs and the strong mechanical interlock between MWCNTs and the eraser substrate, which restricts slippage of MWCNTs on the eraser thereby minimizing hysteresis. The gauge factor of the strain sensor was calculated to be 2.4, which is comparable to and even better than most of the strain and pressure sensors fabricated with more complex designs and architectures. The sensitivity of the capacitive pressure sensor was found to be 0.135 MPa -1 .To demonstrate the applicability of the sensor as artificial electronic skin, the sensor was assembled on various parts of the human body and corresponding movements and touch sensation were monitored. The entire fabrication process is scalable and can be integrated into large areas to map spatial pressure distributions. This low-cost, easily scalable MWCNT pin-rolled eraser-based pressure and strain sensor has huge potential in applications such as artificial e-skin in flexible electronics and medical diagnostics, in particular in surgery as it provides high spatial resolution without a complex nanostructure architecture.