Sample records for FLUORURES DE CARBONE (carbon fluorides)
from WorldWideScience.org

Sample records 1 - 3 shown.



1

Stresa, Italy, 25-27 April 2007 PROFILE CONTROL OF A BOROSILICATE ...


In the process, carbon-fluoride gases, i.e., C 4 F 8 and CHF 3 ... This was due to thick polymer film produced by carbon-fluoride plasma during DRIE. ...

IRevues (France)

2

Profile Control of a Borosilicate-Glass Groove Formed by Deep ...


de T Akashi - 2007 - Autres articlesargon added to carbon-fluoride etching gases, i.e., C4F8 .... with the carbon-fluoride gases caused a fairly large difference between the mask opening and ...

IRevues (France)

3

Download - I-Revues


films of one piezoelectric, known as polyvinylidene fluoride, have already ..... carbon dioxide from the air of a greenhouse-heated planet and "metab- ...

IRevues (France)