Sample records for ROENTGENSPEKTROSKOPIE (x-ray spectroscopy)

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X-ray radiation of highly charged ions : with 52 tables

Beyer, Heinrich F. 1950-; Kluge, Heinz-Jürgen; Shevelko, Viatcheslav P.

German National Library of Science and Technology (GetInfo) (German)


X-ray photoelectron spectroscopy characterisation of high-k dielectric Al2O3 and HfO2 layers deposited on SiO2/Si surface

Vitchev, RG; Pireaux, JJ.; Conard, T.; Bender, H.; Wolstenholme, J; Defranoux, C; 8th European Vacuum Congress (EVC-8)/2nd Annual Conference of the German-Vacuum-Society (DVG)

Ultra thin Al2O3 and HfO2 films (UP to similar to6 nm) were deposited on SiO2/Si wafers by atomic layer chemical vapour deposition (ALCVD(TM,1)) and studied by exsitu X-ray photoelectron spectroscopy (XPS) and spectroscopic ellipsometry (SE). The thickness of these high-k layers (including the thick...

DRIVER (German)


Rayons X et matière : RX 99

Colloque Rayons X et Matière < 3, 1999, Strasbourg>; Ecole Nationale Supérieure des Arts et Industries < Strasbourg>

German National Library of Science and Technology (GetInfo) (German)