WorldWideScience

Sample records for mems movable microelectrodes

  1. Nonhermetic Encapsulation Materials for MEMS-Based Movable Microelectrodes for Long-Term Implantation in the Brain

    Science.gov (United States)

    Jackson, Nathan; Anand, Sindhu; Okandan, Murat; Muthuswamy, Jit

    2010-01-01

    In this paper, we have fabricated and tested several composite materials with a mesh matrix, which are used as encapsulation materials for a novel implantable movable-microelectrode microelectromechanical-system (MEMS) device. Since movable microelectrodes extend off the edge of the MEMS chip and penetrate the brain, a hermetically sealed encapsulation was not feasible. An encapsulation material is needed to prevent cerebral-spinal-fluid entry that could cause failure of the MEMS device and, at the same time, allow for penetration by the microelectrodes. Testing of potential encapsulation materials included penetration-force measurements, gross-leak testing, maximum-pressure testing, and biocompatibility testing. Penetration-force tests showed that untreated mesh matrices and silicone-gel-mesh composites required the least amount of force to penetrate for both nylon 6,6 and polypropylene meshes. The silicone-gel-, poly(dimethylsiloxane)-, polyimide-, and fluoroacrylate-mesh composites with the nylon-mesh matrix were all able to withstand pressures above the normal intracranial pressures. Fourier-transform infrared-spectroscopy analysis and visual inspection of the implanted devices encapsulated by the silicone-gel-mesh composite showed that there was no fluid or debris entry at two and four weeks postimplantation. We conclude that a composite of nylon and silicone-gel meshes will meet the needs of the new generation of implantable devices that require nonhermetic encapsulation. PMID:20414474

  2. Movable MEMS Devices on Flexible Silicon

    KAUST Repository

    Ahmed, Sally

    2013-05-05

    Flexible electronics have gained great attention recently. Applications such as flexible displays, artificial skin and health monitoring devices are a few examples of this technology. Looking closely at the components of these devices, although MEMS actuators and sensors can play critical role to extend the application areas of flexible electronics, fabricating movable MEMS devices on flexible substrates is highly challenging. Therefore, this thesis reports a process for fabricating free standing and movable MEMS devices on flexible silicon substrates; MEMS flexure thermal actuators have been fabricated to illustrate the viability of the process. Flexure thermal actuators consist of two arms: a thin hot arm and a wide cold arm separated by a small air gap; the arms are anchored to the substrate from one end and connected to each other from the other end. The actuator design has been modified by adding etch holes in the anchors to suit the process of releasing a thin layer of silicon from the bulk silicon substrate. Selecting materials that are compatible with the release process was challenging. Moreover, difficulties were faced in the fabrication process development; for example, the structural layer of the devices was partially etched during silicon release although it was protected by aluminum oxide which is not attacked by the releasing gas . Furthermore, the thin arm of the thermal actuator was thinned during the fabrication process but optimizing the patterning and etching steps of the structural layer successfully solved this problem. Simulation was carried out to compare the performance of the original and the modified designs for the thermal actuators and to study stress and temperature distribution across a device. A fabricated thermal actuator with a 250 μm long hot arm and a 225 μm long cold arm separated by a 3 μm gap produced a deflection of 3 μm before silicon release, however, the fabrication process must be optimized to obtain fully functioning

  3. Long-term neural recordings using MEMS based moveable microelectrodes in the brain

    Directory of Open Access Journals (Sweden)

    Nathan Jackson

    2010-06-01

    Full Text Available One of the critical requirements of the emerging class of neural prosthetic devices is to maintain good quality neural recordings over long time periods. We report here a novel (Micro-ElectroMechanical Systems based technology that can move microelectrodes in the event of deterioration in neural signal to sample a new set of neurons. Microscale electro-thermal actuators are used to controllably move microelectrodes post-implantation in steps of approximately 9 µm. In this study, a total of 12 moveable microelectrode chips were individually implanted in adult rats. Two of the 12 moveable microelectrode chips were not moved over a period of 3 weeks and were treated as control experiments. During the first three weeks of implantation, moving the microelectrodes led to an improvement in the average SNR from 14.61 ± 5.21 dB before movement to 18.13 ± 4.99 dB after movement across all microelectrodes and all days. However, the average RMS values of noise amplitudes were similar at 2.98 ± 1.22 µV and 3.01 ± 1.16 µV before and after microelectrode movement. Beyond three weeks, the primary observed failure mode was biological rejection of the PMMA (dental cement based skull mount resulting in the device loosening and eventually falling from the skull. Additionally, the average SNR for functioning devices beyond three weeks was 11.88 ± 2.02 dB before microelectrode movement and was significantly different (p<0.01 from the average SNR of 13.34 ± 0.919 dB after movement. The results of this study demonstrate that MEMS based technologies can move microelectrodes in rodent brains in long-term experiments resulting in improvements in signal quality. Further improvements in packaging and surgical techniques will potentially enable movable microelectrodes to record cortical neuronal activity in chronic experiments.

  4. Polycrystalline-Diamond MEMS Biosensors Including Neural Microelectrode-Arrays

    Directory of Open Access Journals (Sweden)

    Donna H. Wang

    2011-08-01

    Full Text Available Diamond is a material of interest due to its unique combination of properties, including its chemical inertness and biocompatibility. Polycrystalline diamond (poly-C has been used in experimental biosensors that utilize electrochemical methods and antigen-antibody binding for the detection of biological molecules. Boron-doped poly-C electrodes have been found to be very advantageous for electrochemical applications due to their large potential window, low background current and noise, and low detection limits (as low as 500 fM. The biocompatibility of poly-C is found to be comparable, or superior to, other materials commonly used for implants, such as titanium and 316 stainless steel. We have developed a diamond-based, neural microelectrode-array (MEA, due to the desirability of poly-C as a biosensor. These diamond probes have been used for in vivo electrical recording and in vitro electrochemical detection. Poly-C electrodes have been used for electrical recording of neural activity. In vitro studies indicate that the diamond probe can detect norepinephrine at a 5 nM level. We propose a combination of diamond micro-machining and surface functionalization for manufacturing diamond pathogen-microsensors.

  5. Needle-type environmental microsensors: design, construction and uses of microelectrodes and multi-analyte MEMS sensor arrays

    International Nuclear Information System (INIS)

    Lee, Woo Hyoung; Bishop, Paul L; Lee, Jin-Hwan; Choi, Woo-Hyuck; Papautsky, Ian; Hosni, Ahmed A

    2011-01-01

    The development of environmental microsensor techniques is a revolutionary advance in the measurement of both absolute levels and changes in chemical species in the field of environmental engineered and natural systems. The tiny tip (5–15 µm diameter) of microsensors makes them very attractive experimental tools for direct measurements of the chemical species of interest inside biological samples (e.g., biofilm, flocs). Microelectrodes fabricated from pulled micropipettes (e.g., dissolved oxygen, oxidation–reduction potential, ion-selective microelectrode) have contributed to greater understanding of biological mechanisms for decades using microscopic monitoring, and currently microelectromechanical system (MEMS) microfabrication technologies are being successfully applied to fabricate multi-analyte sensor systems for in situ monitoring. This review focuses on needle-type environmental microsensor technology, including microelectrodes and multi-analyte MEMS sensor arrays. Design, construction and applications to biofilm research of these sensors are described. Practical methods for biofilm microprofile measurements are presented and several in situ applications for a biofilm study are highlighted. Ultimately, the developed needle-type microsensors combined with molecular biotechnology (such as microscopic observation with fluorescent probes) show the tremendous promise of micro-environmental sensor technology. (topical review)

  6. Design, simulation and fabrication of a novel contact-enhanced MEMS inertial switch with a movable contact point

    International Nuclear Information System (INIS)

    Cai Haogang; Ding Guifu; Yang Zhuoqing; Su Zhijuan; Zhou Jiansheng; Wang Hong

    2008-01-01

    A novel inertial switch based on a micro-electro-mechanical system (MEMS) was designed, which consists of three main parts: a proof mass as the movable electrode, a cross beam as the stationary electrode and a movable contact point to prolong the contact time. A MATLAB/Simulink model, which had been verified by comparison with ANSYS transient simulation, was built to simulate the dynamic response, based on which the contact-enhancing mechanism was confirmed and the dependence of threshold acceleration on the proof mass thickness was studied. The simulated dynamic responses under various accelerations exhibit satisfactory device behaviors: the switch-on time is prolonged under transient acceleration; the switch-on state is more continuous than the conventional design under long lasting acceleration. The inertial micro-switch was fabricated by multilayer electroplating technology and then tested by a drop hammer experiment. The test results indicate that the contact effect was improved significantly and a steady switch-on time of over 50 µs was observed under half-sine wave acceleration with 1 ms duration, in agreement with the dynamic simulation

  7. Packaging and Non-Hermetic Encapsulation Technology for Flip Chip on Implantable MEMS Devices.

    Science.gov (United States)

    Sutanto, Jemmy; Anand, Sindhu; Sridharan, Arati; Korb, Robert; Zhou, Li; Baker, Michael S; Okandan, Murat; Muthuswamy, Jit

    2012-04-10

    We report here a successful demonstration of a flip-chip packaging approach for a microelectromechanical systems (MEMS) device with in-plane movable microelectrodes implanted in a rodent brain. The flip-chip processes were carried out using a custom-made apparatus that was capable of the following: 1) creating Ag epoxy microbumps for first-level interconnect; 2) aligning the die and the glass substrate; and 3) creating non-hermetic encapsulation (NHE). The completed flip-chip package had an assembled weight of only 0.5 g significantly less than the previously designed wire-bonded package of 4.5 g. The resistance of the Ag bumps was found to be negligible. The MEMS micro-electrodes were successfully tested for its mechanical movement with microactuators generating forces of 450 μ N with a displacement resolution of 8.8 μ m/step. An NHE on the front edge of the package was created by patterns of hydrophobic silicone microstructures to prevent contamination from cerebrospinal fluid while simultaneously allowing the microelectrodes to move in and out of the package boundary. The breakdown pressure of the NHE was found to be 80 cm of water, which is significantly (4.5-11 times) larger than normal human intracranial pressures. Bench top tests and in vivo tests of the MEMS flip-chip packages for up to 75 days showed reliable NHE for potential long-term implantation.

  8. Movable bridge maintenance monitoring.

    Science.gov (United States)

    2013-10-01

    Movable bridges have particular maintenance issues, which cost considerably more than those of fixed bridges, : mostly because of the complex interaction of the mechanical, electrical and structural components. In order to track : maintenance and ope...

  9. MEMS packaging

    CERN Document Server

    Hsu , Tai-Ran

    2004-01-01

    MEMS Packaging discusses the prevalent practices and enabling techniques in assembly, packaging and testing of microelectromechanical systems (MEMS). The entire spectrum of assembly, packaging and testing of MEMS and microsystems, from essential enabling technologies to applications in key industries of life sciences, telecommunications and aerospace engineering is covered. Other topics included are bonding and sealing of microcomponents, process flow of MEMS and microsystems packaging, automated microassembly, and testing and design for testing.The Institution of Engineering and Technology is

  10. Automatic control of movable detectors

    International Nuclear Information System (INIS)

    Wassel, W.W.; Remley, G.W.

    1980-01-01

    An invention is described, relating to a microprocessor based control system for a plurality of movable detectors, e.g. a nuclear reactor flux mapping system, with new system architecture which increases system availability by preventing faults on any of the detection channels from disabling the remaining channels. The system has, say, four drive trains for a number of detectors. Functional separation is realized by having two channels control their associated two drive trains. Redundancy is provided by having dual channels for operator interface. Communications between the functionally separate channels is accomplished by employing two-ported memories in conjunction with multiple microprocessors. (author)

  11. Pyrolytic carbon microelectrodes for impedance based cell sensing

    DEFF Research Database (Denmark)

    Hassan, Yasmin Mohamed; Caviglia, Claudia; Hemanth, Suhith

    2016-01-01

    Electrically conductive glass-like carbon structures can be obtained from a polymer template through a pyrolysis process. These structures can be used as electrodes for bio sensing applications such as electrochemical evaluation of cell adhesion and proliferation. This study focuses...... on the optimization of two dimensional (2D) pyrolytic carbon microelectrodes with the carbon MEMS (C-MEMS) process using the negative epoxy photoresist SU-8. Different electrochemical microchips with carbon working (WE) and counter electrode (CE) were fabricated. More specifically, pyrolysis process was optimized...... to decrease the resistivity of the resulting carbon material and improve the performance in cyclic voltammetry (CV) and electrochemical impedance spectroscopy (EIS). Finally, EIS was used to monitor adhesion and proliferation of HeLa cells....

  12. Automatic control of movable detectors

    International Nuclear Information System (INIS)

    Neuner, J.A.; Oates, R.M.

    1980-01-01

    An invention is described, relating to a microprocessor based control system for a plurality of movable detectors e.g. a nuclear reactor flux mapping system. It consists of two operationally independent electronic subsystems each including a microprocessor which controls the positioning of separate groups of in-core detectors within core thimbles. A communications link, in the form of auxiliary bases and buffers, is provided between the two subsystems to enable one subsystem and its associated group of detectors to assume the flux mapping responsibility of the other subsystem in the event of a subsystem malfunction. Normally, this communication involves presentation of system status information from one subsystem to a multi-port memory in the other system for coordinate control of both systems. This arrangement provides increased system availability as compared to the prior art systems. (author)

  13. Movability or Autonomy for Humans

    KAUST Repository

    Schnapp, Jeffrey

    2018-01-18

    A human-centered approach to the design of smart robotic vehicles Contrary to the feverish promises of early 20th century futurists, the romance of the road has driven humanity down a dead end. The civilization of speed, acceleration, and motorized mobility has transformed the world into a perpetual traffic jam. Entire cities are being sacrificed on the altar of automobility. The landscape is being reduced to a flyover and drive-through zone, fissured by asphalt ribbons, fracked to extract fuels whose combustion is cooking the globe. Nearly 80% of urban areas are wrapped in dense blankets of smog. People arenメt moving more: they are moving less and with greater difficulty. And they are facing the health consequences of the sedentary life-styles they have been encouraged to adopt. If this is era of mobility, then I believe itメs time to shift gears: from mobility to movability. In this lecture, Jeffrey Schnapp will discuss how Movability unfolds on the far more intimate, intelligent, human-scale of the emerging 21st century cityscape. Itメs the scale of autonomous land drones threading their way down busy sidewalks; the scale of smart cargo carts invisibly coupled to workers making last mile deliveries in pedestrian-only zones; the scale of electric microcars platooning like trains while stopping off at individual destinations for pickups and dropoffs; and the scale of civic spaces animated by new kinds of vehicles that help the aging or the mobility-impaired to improve the quality of their lives and extend the range of their activities.

  14. “Mirabili visioni”: from movable books to movable texts

    Directory of Open Access Journals (Sweden)

    Gianfranco Crupi

    2016-01-01

    Full Text Available This contribution reconstructs the history of movable books, books created for a wide range of different purposes (teaching, mnemonics, play, divining, etc. including mechanical or paratextual devices demanding or soliciting the interaction of the reader. The investigation runs from hand-written books to the most courageous paper-engineering experiments of the 20th century Avant-Garde, considering some specific editorial genres, including calendars, “libri di sorti”, anatomical books, navigation handbooks etc., and animated children's books. In particular, it demonstrates how the happy season for animated paper production and publishing of the 19th century would not have been possible without the scientific inheritance of optical studies and vision sciences, precursors a short time before the invention of the Lumière brothers (1895. The study also examines some literary works using combinatorial mechanisms, experimenting the semiotic potential of expressive codes and very different techniques and materials: the reference is to books of Futurism and Dadaism, the "artists' book", and other avant-garde texts from the second half of the 20th century.

  15. Carbon microelectromechanical systems (C-MEMS) based microsupercapacitors

    KAUST Repository

    Agrawal, Richa

    2015-05-18

    The rapid development in miniaturized electronic devices has led to an ever increasing demand for high-performance rechargeable micropower scources. Microsupercapacitors in particular have gained much attention in recent years owing to their ability to provide high pulse power while maintaining long cycle lives. Carbon microelectromechanical systems (C-MEMS) is a powerful approach to fabricate high aspect ratio carbon microelectrode arrays, which has been proved to hold great promise as a platform for energy storage. C-MEMS is a versatile technique to create carbon structures by pyrolyzing a patterned photoresist. Furthermore, different active materials can be loaded onto these microelectrode platforms for further enhancement of the electrochemical performance of the C-MEMS platform. In this article, different techniques and methods in order to enhance C-MEMS based various electrochemical capacitor systems have been discussed, including electrochemical activation of C-MEMS structures for miniaturized supercapacitor applications, integration of carbon nanostructures like carbon nanotubes onto C-MEMS structures and also integration of pseudocapacitive materials such as polypyrrole onto C-MEMS structures. © (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.

  16. Conducting polymer 3D microelectrodes

    DEFF Research Database (Denmark)

    Sasso, Luigi; Vazquez, Patricia; Vedarethinam, Indumathi

    2010-01-01

    Conducting polymer 3D microelectrodes have been fabricated for possible future neurological applications. A combination of micro-fabrication techniques and chemical polymerization methods has been used to create pillar electrodes in polyaniline and polypyrrole. The thin polymer films obtained...... showed uniformity and good adhesion to both horizontal and vertical surfaces. Electrodes in combination with metal/conducting polymer materials have been characterized by cyclic voltammetry and the presence of the conducting polymer film has shown to increase the electrochemical activity when compared...

  17. 49 CFR 236.713 - Bridge, movable.

    Science.gov (United States)

    2010-10-01

    ... 49 Transportation 4 2010-10-01 2010-10-01 false Bridge, movable. 236.713 Section 236.713 Transportation Other Regulations Relating to Transportation (Continued) FEDERAL RAILROAD ADMINISTRATION, DEPARTMENT OF TRANSPORTATION RULES, STANDARDS, AND INSTRUCTIONS GOVERNING THE INSTALLATION, INSPECTION...

  18. MEMS Calculator

    Science.gov (United States)

    SRD 166 MEMS Calculator (Web, free access)   This MEMS Calculator determines the following thin film properties from data taken with an optical interferometer or comparable instrument: a) residual strain from fixed-fixed beams, b) strain gradient from cantilevers, c) step heights or thicknesses from step-height test structures, and d) in-plane lengths or deflections. Then, residual stress and stress gradient calculations can be made after an optical vibrometer or comparable instrument is used to obtain Young's modulus from resonating cantilevers or fixed-fixed beams. In addition, wafer bond strength is determined from micro-chevron test structures using a material test machine.

  19. New movable plate for efficient millimeter wave vertical on-chip antenna

    KAUST Repository

    Marnat, Loic

    2013-04-01

    A new movable plate concept is presented in this paper to realize mm-wave vertical on-chip antennas through MEMS based post-processing steps in a CMOS compatible process. By virtue of its vertical position, the antenna is isolated from the lossy Si substrate and hence performs with a better efficiency as compared to the horizontal position. In addition, the movable plate concept enables polarization diversity by providing both horizontal and vertical polarizations on the same chip. Through a first iteration fractal bowtie antenna design, dual band (60 and 77 GHz) operation is demonstrated in both horizontal and vertical positions without any change in dimensions or use of switches for two different mediums (Si and air). To support the movable plate concept, the transmission line and antenna are designed on a flexible polyamide, where the former has been optimized to operate in the bent position. The design is highly suitable for compact, low cost and efficient SoC solutions. © 1963-2012 IEEE.

  20. 49 CFR 236.766 - Locking, movable bridge.

    Science.gov (United States)

    2010-10-01

    ... 49 Transportation 4 2010-10-01 2010-10-01 false Locking, movable bridge. 236.766 Section 236.766... Locking, movable bridge. The rail locks, bridge locks, bolt locks, circuit controllers, and electric locks used in providing interlocking protection at a movable bridge. ...

  1. Selection of High Strength Encapsulant for MEMS Devices Undergoing High Pressure Packaging

    OpenAIRE

    Hamzah, A.A.; Husaini, Y.; Majlis, B.Y.; Ahmad, I.

    2007-01-01

    Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing); International audience; Deflection behavior of several encapsulant materials under uniform pressure was studied to determine the best encapsulant for MEMS device. Encapsulation is needed to protect movable parts of MEMS devices during high pressure transfer molded packaging process. The selected encapsulant material has to have surface deflection of less than 5 ?m under 100 atm vertical loading. Deflec...

  2. Lead salt resonant cavity enhanced detector with MEMS mirror

    Science.gov (United States)

    Felder, F.; Fill, M.; Rahim, M.; Zogg, H.; Quack, N.; Blunier, S.; Dual, J.

    2010-01-01

    We describe a tunable resonant cavity enhanced detector (RCED) for the mid-infrared employing narrow gap lead-chalcogenide (IV-VI) layers on a Si substrate. The device consists of an epitaxial Bragg reflector layer, a thin p-n+ heterojunction with PbSrTe as detecting layer and a micro-electro-mechanical system (MEMS) micromirror as second mirror. Despite the thin absorber layer the sensitivity is even higher than for a conventional detector. Tunability is achieved by changing the cavity length with a vertically movable MEMS mirror. The device may be used as miniature infrared spectrometer to cover the spectral range from 30 μm.

  3. Soldering of Nanotubes onto Microelectrodes

    DEFF Research Database (Denmark)

    Madsen, Dorte Nørgaard; Mølhave, Kristian; Mateiu, Ramona Valentina

    2003-01-01

    Suspended bridges of individual multiwalled carbon nanotubes were fabricated inside a scanning electron microscope by soldering the nanotube onto microelectrodes with highly conducting gold-carbon material. By the decomposition of organometallic vapor with the electron beam, metal-containing solder...... bonds were formed at the intersection of the nanotube and the electrodes. Current-voltage curves indicated metallic conduction of the nanotubes, with resistances in the range of 9-29 kOmega. Bridges made entirely of the soldering material exhibited resistances on the order of 100 Omega, and the solder...

  4. Radiation shielded movable work station apparatus

    International Nuclear Information System (INIS)

    Meuschke, R.E.; Andrews, H.N.; Massaro, A.A. Jr.

    1982-01-01

    A movable work station includes travelling hoist-supported tools and a radiation-shielded enclosure or gondola that may be moved vertically or rotated. The enclosure is divided and accommodates four upright workers in facing pairs at opposite sides of a clearanceway observable and accessible from the gondola interior via lead glass windows and hand holes. The work station is particularly suitable for personnel involved in tube bundle replacement tasks performed within the shell of a nuclear power plant steam generator

  5. Conducting Polymer 3D Microelectrodes

    Directory of Open Access Journals (Sweden)

    Jenny Emnéus

    2010-12-01

    Full Text Available Conducting polymer 3D microelectrodes have been fabricated for possible future neurological applications. A combination of micro-fabrication techniques and chemical polymerization methods has been used to create pillar electrodes in polyaniline and polypyrrole. The thin polymer films obtained showed uniformity and good adhesion to both horizontal and vertical surfaces. Electrodes in combination with metal/conducting polymer materials have been characterized by cyclic voltammetry and the presence of the conducting polymer film has shown to increase the electrochemical activity when compared with electrodes coated with only metal. An electrochemical characterization of gold/polypyrrole electrodes showed exceptional electrochemical behavior and activity. PC12 cells were finally cultured on the investigated materials as a preliminary biocompatibility assessment. These results show that the described electrodes are possibly suitable for future in-vitro neurological measurements.

  6. Pyrolytic 3D Carbon Microelectrodes for Electrochemistry

    DEFF Research Database (Denmark)

    Hemanth, Suhith; Caviglia, Claudia; Amato, Letizia

    2016-01-01

    This work presents the fabrication and characterization of suspended three-dimensional (3D) pyrolytic carbon microelectrodes for electrochemical applications. For this purpose, an optimized process with multiple steps of UV photolithography with the negative tone photoresist SU-8 followed...... by pyrolysis at 900ºC for 1h was developed. With this process, microelectrode chips with a three electrode configuration were fabricated and characterized with cyclic voltammetry (CV) using a 10mM potassium ferri-ferrocyanide redox probe in a custom made batch system with magnetic clamping. The 3D pyrolytic...... carbon microelectrodes displayed twice the higher peak current compared to 2D....

  7. Band-type microelectrodes for amperometric immunoassays

    Energy Technology Data Exchange (ETDEWEB)

    Lee, Ga-Yeon; Chang, Young Wook; Ko, Hyuk [Department of Materials Science and Engineering, Yonsei University, 134 Shinchon-dong, Seodaemun-gu, Seoul, 120-749 (Korea, Republic of); Kang, Min-Jung [Korea Institute of Science and Technology (KIST), Seoul (Korea, Republic of); Pyun, Jae-Chul, E-mail: jcpyun@yonsei.ac.kr [Department of Materials Science and Engineering, Yonsei University, 134 Shinchon-dong, Seodaemun-gu, Seoul, 120-749 (Korea, Republic of)

    2016-07-20

    A band-type microelectrode was made using a parylene-N film as a passivation layer. A circular-type, mm-scale electrode with the same diameter as the band-type microelectrode was also made with an electrode area that was 5000 times larger than the band-type microelectrode. By comparing the amperometric signals of 3,5,3′,5′-tetramethylbenzidine (TMB) samples at different optical density (OD) values, the band-type microelectrode was determined to be 9 times more sensitive than the circular-type electrode. The properties of the circular-type and the band-type electrodes (e.g., the shape of their cyclic voltammograms, the type of diffusion layer used, and the diffusion layer thickness per unit electrode area) were characterized according to their electrode area using the COMSOL Multiphysics software. From these simulations, the band-type electrode was estimated to have the conventional microelectrode properties, even when the electrode area was 100 times larger than a conventional circular-type electrode. These results show that both the geometry and the area of an electrode can influence the properties of the electrode. Finally, amperometric analysis based on a band-type electrode was applied to commercial ELISA kits to analyze human hepatitis B surface antigen (hHBsAg) and human immunodeficiency virus (HIV) antibodies. - Highlights: • A band-type microelectrode was made using a parylene-N film as a passivation layer. • The band-type microelectrode was 14-times more sensitive than circular-type electrode. • The influence of geometry on microelectrode properties was simulated using COMSOL. • The band-type electrode was applied to ELISA kits for hHBsAg and hHIV-antibodies.

  8. LSM Microelectrodes: Kinetics and Surface Composition

    DEFF Research Database (Denmark)

    Hansen, Karin Vels; Norrman, Kion; Jacobsen, Torben

    2015-01-01

    Lanthanum strontium manganite microelectrodes with the nominal composition of (La0.75Sr0.25)0.95MnO3 and a thickness of ca 500 nm was electrochemically characterized in situ at temperatures from 660 to 850◦C using a controlled atmosphere high temperature scanning probe microscope. Impedance...... electron microscopy were performed to observe electrical, chemical and structural changes on the microelectrodes. © 2015 The Electrochemical Society....

  9. Theoretical analysis of intracortical microelectrode recordings

    Science.gov (United States)

    Lempka, Scott F.; Johnson, Matthew D.; Moffitt, Michael A.; Otto, Kevin J.; Kipke, Daryl R.; McIntyre, Cameron C.

    2011-08-01

    Advanced fabrication techniques have now made it possible to produce microelectrode arrays for recording the electrical activity of a large number of neurons in the intact brain for both clinical and basic science applications. However, the long-term recording performance desired for these applications is hindered by a number of factors that lead to device failure or a poor signal-to-noise ratio (SNR). The goal of this study was to identify factors that can affect recording quality using theoretical analysis of intracortical microelectrode recordings of single-unit activity. Extracellular microelectrode recordings were simulated with a detailed multi-compartment cable model of a pyramidal neuron coupled to a finite-element volume conductor head model containing an implanted recording microelectrode. Recording noise sources were also incorporated into the overall modeling infrastructure. The analyses of this study would be very difficult to perform experimentally; however, our model-based approach enabled a systematic investigation of the effects of a large number of variables on recording quality. Our results demonstrate that recording amplitude and noise are relatively independent of microelectrode size, but instead are primarily affected by the selected recording bandwidth, impedance of the electrode-tissue interface and the density and firing rates of neurons surrounding the recording electrode. This study provides the theoretical groundwork that allows for the design of the microelectrode and recording electronics such that the SNR is maximized. Such advances could help enable the long-term functionality required for chronic neural recording applications.

  10. Modelling of damping forces occuring in simple MEMS systems

    Directory of Open Access Journals (Sweden)

    Kamil Urbanowicz

    2015-12-01

    Full Text Available A certain damping force occurs in the micro-mechanical systems referred as MEMS. At the design stage of such systems, these forces must be accurately estimated. As shown in this work, in all systems operating at low frequencies, most important force is the one associated with the flotation of air film from the volume between two parallel operating movable MEMS plates. This force can be accurately estimated by analytical methods known from the literature. The paper presents analytical solutions that are frequently used in practice for simple plates. Also some simple simulations, using all described analytical solutions compared with the results of specialized program called Comsol Multyphysics, are shown. Presented research demonstrate the effectiveness of numerical software.[b]Keywords[/b]: MEMS, damping forces, Reynolds equation, modelling, simulation

  11. Failure Mechanisms of a Gold Microelectrode in Bioelectronics Applications

    Directory of Open Access Journals (Sweden)

    Jonghun Kim

    2015-01-01

    Full Text Available The generation, growth, and collapse of tiny bubbles are inevitable for a microelectrode working in aqueous environment, thus resulting in physical damages on the microelectrode. The failure mechanisms of a microelectrode induced by tiny bubble collapsing are investigated by generating tiny hydrogen bubbles on a gold microelectrode through deionized water electrolysis. The surface of the microelectrode is modified with a thiol-functionalized arginine-glycine-aspartic acid peptide to generate perfectly spherical bubbles in proximity of the surface. The failure of an Au microelectrode is governed by two damage mechanisms, depending on the thickness of the microelectrode: a water-hammer pressure due to the violent collapse of a single large bubble, formed through merging of small bubbles, for ultrathin Au microelectrodes of 40–60 nm in thickness, and an energy accumulation resulting from the repetitive collapse of tiny bubbles for thick Au microelectrodes of 100–120 nm.

  12. 23 CFR 650.809 - Movable span bridges.

    Science.gov (United States)

    2010-04-01

    ... 23 Highways 1 2010-04-01 2010-04-01 false Movable span bridges. 650.809 Section 650.809 Highways FEDERAL HIGHWAY ADMINISTRATION, DEPARTMENT OF TRANSPORTATION ENGINEERING AND TRAFFIC OPERATIONS BRIDGES, STRUCTURES, AND HYDRAULICS Navigational Clearances for Bridges § 650.809 Movable span bridges. A fixed bridge...

  13. The PEP-II Movable Collimators

    Energy Technology Data Exchange (ETDEWEB)

    DeBarger, S.; Metcalfe, S.; Ng, C.; Porter, T.G.; Seeman, J.; Sullivan, M.; Wienands, U.; /SLAC

    2006-03-13

    Three movable collimators have been manufactured for installation in the PEP-II LER and HER beamlines upstream of BaBar to improve backgrounds in BaBar by a factor of 2. Each collimator has a pair of horizontally opposed, water cooled jaws with RF finger seals all around the edge of the jaws, these seals are the only sliding parts inside the vacuum chamber. Each jaw travels independently through a distance of 16.5 mm (LER) or 21mm (HER) and is supported above the collimator from motorized slideways with position feedback. The larger HER collimator has a titanium sublimation pump incorporated into the underside of the collimator, pumping through RF screens in the bottom of the chamber. Water cooled fixed ramps protect the leading and trailing edges of the jaws.

  14. Batch fabrication of nanotubes suspended between microelectrodes

    DEFF Research Database (Denmark)

    Mateiu, Ramona Valentina; Stöckli, T.; Knapp, H. F.

    2007-01-01

    We report a fabrication method, which uses standard UV-lithography to pattern the catalyst for the chemical vapour deposition(CVD) of suspended double clamped single walled carbon nanotubes. By using an aqueous solution of Fe(NO3)3 the patterning of the catalyst material onto microelectrodes can...... to the regions of maximum electric field, enabling accurate positioning of a nanotube by controlling the shape of the microelectrodes. The CNT bridges are deflected tens of nm when a DC voltage is applied between the nanotube and a gate microelectrode indicating that the clamping through the catalyst particles...... is not only mechanically stable but also electrical conducting. This method could be used to fabricate nanoelectromechanical systems based on suspended double clamped CNTs depending only on photolithography and standard Cleanroom processes....

  15. Biomaterials for MEMS

    CERN Document Server

    Chiao, Mu

    2011-01-01

    This book serves as a guide for practicing engineers, researchers, and students interested in MEMS devices that use biomaterials and biomedical applications. It is also suitable for engineers and researchers interested in MEMS and its applications but who do not have the necessary background in biomaterials.Biomaterials for MEMS highlights important features and issues of biomaterials that have been used in MEMS and biomedical areas. Hence this book is an essential guide for MEMS engineers or researchers who are trained in engineering institutes that do not provide the background or knowledge

  16. TFTR movable limiter instrumentation and controls

    International Nuclear Information System (INIS)

    Frankenberg, J.; Collins, D.; Kaufmann, D.; Mamoun, A.

    1983-01-01

    The TFTR movable limiter is a single poloidal limiter located within one 18 /SUP o/ segment of the vacuum vessel. It consists of three (3) interconnected inconel backing plates covered with titanium carbide coated graphite tiles. The backing plates are positioned by three independent screw drive actuators. Cooling water is fed through the horizontal port cover to tubes brazed onto the backs of the backing plates. Thermocouples monitor the limiter temperature. (1) and more fully described in refs. (1) and (2). The positioning actuators are driven by independently controlled DC servo motors, controlled either locally or from CICADA. Drive motor shaft position is monitored by chain driven encoders and potentiometers. Limiter blade position can be varied to suit any plasma within the operating range. CICADA is programmed to keep the limiter stroke within safe operating limits. A microprocessor duplicates the CICADA protective function allowing limiter operation without CICADA. The potentiometer signal is sent to an analog computer, which safeguards the limiter against failure of the encoders or the micro-processor. Cooling water flows through the limiter in 3 separate paths, one for each blade. The flow rate and temperature rise through each loop are measured accurately to allow CICADA to calculate the heat into each blade. The water system is also interlocked and alarmed to prevent dumping of water into the vacuum vessel

  17. Long-term maintenance monitoring demonstration on a movable bridge.

    Science.gov (United States)

    2011-09-30

    The maintenance costs related to movable bridges are considerably higher than those of fixed bridges, mostly : because of the complex interaction of the mechanical, electrical and structural components. A malfunction of any : component can cause an u...

  18. Analysis of movable bus stop boarding and alighting areas.

    Science.gov (United States)

    2013-05-01

    This study explored the feasibility of using movable and reusable boarding and alighting (B&A) pads at bus stops. : Potential design alternatives in terms of materials and structural support for these pads were evaluated. The review : focused on the ...

  19. Micro-motion analyzer used for dynamic MEMS characterization

    Science.gov (United States)

    Guo, Tong; Chang, Hong; Chen, Jinping; Fu, Xing; Hu, Xiaotang

    2009-03-01

    A computer-controlled micro-motion analyzer (MMA) to study the dynamic behavior of movable structures of MEMS is described in this paper. It employs two optical nondestructive methods—computer microvision for in-plane motion measurement and phase-shifting interferometry for out-of-plane motion measurement. This fully integrated system includes a high-performance imaging system, drive electronics, data acquisition and data analysis software. This system can freeze the fast motions of MEMS devices using strobed illumination and measure motions in three dimensions with nanometer accuracy. The static measurement accuracy and repeatability of the system is calibrated by a step height standard which is certified by National Institute of Standards and Technology (NIST). The capabilities of this system are illustrated with a study of the dynamic behaviors of a surface micromachined polysilicon micro-resonator.

  20. a Movable Charging Unit for Green Mobility

    Science.gov (United States)

    ElBanhawy, E. Y.; Nassar, K.

    2013-05-01

    Battery swapping of electric vehicles (EVs) matter appears to be the swiftest and most convenient to users. The existence of swapping stations increases the feasibility of distributed energy storage via the electric grid. However, it is a cost-prohibitive way of charging. Early adaptors' preferences of /perceptions about EV system in general, has its inflectional effects on potential users hence the market penetration level. Yet, the charging matter of electric batteries worries the users and puts more pressure on them with the more rigorous planning-ahead they have to make prior to any trip. This paper presents a distinctive way of charging. It aims at making the overall charging process at ease. From a closer look into the literature, most of EVs' populations depend on domestic charge. Domestic charging gives them more confidence and increases the usability factor of the EV system. Nevertheless, they still need to count on the publically available charging points to reach their destination(s). And when it comes to multifamily residences, it becomes a thorny problem as these apartments do not have a room for charging outlets. Having said the irritating charging time needed to fatten the batteries over the day and the minimal average mileage drove daily, hypothetically, home delivery charging (Movable Charging Unit-MCU) would be a stupendous solution. The paper discusses the integration of shortest path algorithm problem with the information about EV users within a metropolitan area, developing an optimal route for a charging unit. This MCU delivers charging till homes whether by swapping batteries or by fast charging facility. Information about users is to be provided by the service provider of the neighbourhood, which includes charging patterns (timing, power capacity). This problem lies under the shortest path algorithms problem. It provides optimal route of charging that in return shall add more reliability and usability values and alleviate the charging

  1. Modularly Integrated MEMS Technology

    National Research Council Canada - National Science Library

    Eyoum, Marie-Angie N

    2006-01-01

    Process design, development and integration to fabricate reliable MEMS devices on top of VLSI-CMOS electronics without damaging the underlying circuitry have been investigated throughout this dissertation...

  2. Pyrolytic 3D Carbon Microelectrodes for Electrochemistry

    DEFF Research Database (Denmark)

    Hemanth, Suhith; Caviglia, Claudia; Amato, Letizia

    2016-01-01

    electrochemical activity, chemical stability, and ease in surface functionalization [1]. The most common carbon microfabrication techniques (i.e. screen printing) produce two-dimensional (2D) electrodes, which limit the detection sensitivity. Hence several 3D microfabrication techniques have been explored...... a critical role in fabricating suspended layer. Non cross-linked SU-8 is developed in propylene glycol monomethyl ether acetate (PGMEA) for 30min (figure 1.A.d). The obtained SU-8 polymer templates are then pyrolysed at 900C for 1h in an N2 environment to obtain suspended 3D pyrolysed carbon microelectrodes...... (figure.1.A.e). By sequentially repeating the steps shown in figure 1.A. b, c and d followed by a final development step, a multi-layered polymer template can be obtained which can be pyrolysed to produce 3D carbon microelectrodes (figure 1.A.f). The height of the singe carbon layer (figure 1.A.e) is 21...

  3. Fabrication and characterization of sputtered-carbon microelectrode arrays.

    Science.gov (United States)

    Sreenivas, G; Ang, S S; Fritsch, I; Brown, W D; Gerhardt, G A; Woodward, D J

    1996-06-01

    This paper describes a robust and reliable process for fabricating a novel sputter-deposited, thin-film carbon microelectrode array using standard integrated circuit technologies and silicon micromachining. Sputter-deposited carbon films were investigated as potential candidates for microelectrode materials. The surface properties and cross section of the microelectrode arrays were studied by atomic force microscopy and scanning electron microscopy, respectively. Electrical site impedance, crosstalk, and lifetime (dielectric integrity) of microelectrodes in the array were characterized. Electrochemical response of the microelectrodes to hexaammineruthenium(III) chloride and dopamine were investigated by fast-scan cyclic voltammetry and high-speed, computer-based chronoamperometry; results show that thin-film carbon microelectrodes are well-behaved electrochemically. The thin carbon films offer extremely good electrical, mechanical, and chemical properties and thus qualify as viable candidates for various electroanalytical applications, particularly acute neurophysiological studies.

  4. Microelectromechanical Systems (MEMS)

    Indian Academy of Sciences (India)

    conference included a theme symposium on MEMS that spanned three days with paper presentations covering various aspects of MEMS technology. Out of all the papers presented in the symposium, we selected fifteen papers based on their reviews and other feedback and asked the authors to write the papers for ...

  5. Design of the movable limiters for JT-60

    International Nuclear Information System (INIS)

    Takashima, Tetsuo; Yamamoto, Masahiro; Nakamura, Hiroo; Ohkubo, Minoru; Ohta, Mitsuru

    1976-07-01

    Two fast-acting movable rail limiters will be used in JT-60 to suppress skin effect of the plasma current with a large radius. They travel safely through a stroke of about 1 m for 0.1 sec in the build-up phase of plasma current. The movable limiter system consists of a driving mechanism, a vacuum seal, a bearing used at high temperatures in a vacuum, a molybdenum rail limiter weighing 200 kg and its auxiliary members. Many problems are involved in construction of the system because the design specifications exceed the present technology. Described are design of the movable limiter system for JT-60 and problems in the mechanical, electrical and vacuum aspects. (auth.)

  6. Suspended 3D pyrolytic carbon microelectrodes for electrochemistry

    DEFF Research Database (Denmark)

    Hemanth, Suhith; Caviglia, Claudia; Keller, Stephan Sylvest

    2017-01-01

    the mechanical stability, shrinkage and material properties. The smallest feature size fabricated in the suspended carbon layer was 2 μm. A three electrode microelectrode chip with 3D pyrolytic carbon microstructures as the working electrode was designed and fabricated. The electrodes were characterized...... resistance as compared to 2D carbon electrodes. The higher sensitivity of 3D carbon microelectrodes for electrochemical sensing was illustrated by dopamine detection.......Carbon microelectrodes have a wide range of applications because of their unique material properties and biocompatibility. This work presents the fabrication and characterization of suspended pyrolytic carbon microstructures serving as three-dimensional (3D) carbon microelectrodes...

  7. Entangling movable mirrors in a double cavity system

    DEFF Research Database (Denmark)

    Pinard, Michel; Dantan, Aurelien Romain; Vitali, David

    2005-01-01

    We propose a double-cavity set-up capable of generating a stationary entangled state of two movable mirrors at cryogenic temperatures. The scheme is based on the optimal transfer of squeezing of input optical fields to mechanical vibrational modes of the mirrors, realized by the radiation pressure...

  8. The link between Movability Number and Incipient Motion in river ...

    African Journals Online (AJOL)

    This allowed for a firmer definition of Incipient Motion as well as a new bedload transportation equation. Additional laboratory experimentation for Particle Reynolds number over the range 0.12-486 facilitated the improved prediction of Incipient Motion from a plot of the critical Movability Number vs. Particle Reynolds number ...

  9. Novel First-Level Interconnect Techniques for Flip Chip on MEMS Devices.

    Science.gov (United States)

    Sutanto, Jemmy; Anand, Sindhu; Patel, Chetan; Muthuswamy, Jit

    2011-11-03

    Flip-chip packaging is desirable for microelectro-mechanical systems (MEMS) devices because it reduces the overall package size and allows scaling up the number of MEMS chips through 3-D stacks. In this report, we demonstrate three novel techniques to create first-level interconnect (FLI) on MEMS: 1) Dip and attach technology for Ag epoxy; 2) Dispense technology for solder paste; 3) Dispense, pull, and attach technology (DPAT) for solder paste. The above techniques required no additional microfabrication steps, produced no visible surface contamination on the MEMS active structures, and generated high-aspect-ratio interconnects. The developed FLIs were successfully tested on MEMS moveable microelectrodes microfabricated by SUMMiTV TM process producing no apparent detrimental effect due to outgassing. The bumping processes were successfully applied on Al-deposited bond pads of 100 μ m × 100 μ m with an average bump height of 101.3 μ m for Ag and 184.8 μ m for solder (63Sn, 37Pb). DPAT for solder paste produced bumps with the aspect ratio of 1.8 or more. The average shear strengths of Ag and solder bumps were 78 MPa and 689 kPa, respectively. The electrical test on Ag bumps at 794 A/cm 2 demonstrated reliable electrical interconnects with negligible resistance. These scalable FLI technologies are potentially useful for MEMS flip-chip packaging and 3-D stacking.

  10. Fabrication of three-dimensional carbon microelectrodes for electrochemical sensing

    DEFF Research Database (Denmark)

    Hemanth, Suhith

    microelectrodes four different model systems (Glucose sensing, Yeast analysis, Dopamine detection in human stem cell and bone cell monitoring) were tested. In all the model systems 3D carbon microelectrodes showed a 2-3 folds higher sensing signal when compared to 2D carbon electrodes.......Carbon microelectrodes have a wide range of applications because of their unique material properties and biocompatibility. The aim of the research work carried out in this thesis was to develop three-dimensional (3D) carbon microelectrodes for electrochemical applications. Three different...... fabrication processes were established for fabrication of 3D carbon microelectrodes using UV photolithography followed by pyrolysis. UV exposure at three different wavelengths 365 nm, 313 nm and 405 nm was optimized to fabricate suspended 3D epoxy polymer templates. The polymer template was pyrolysed at high...

  11. A non-resonant fiber scanner based on an electrothermally-actuated MEMS stage.

    Science.gov (United States)

    Zhang, Xiaoyang; Duan, Can; Liu, Lin; Li, Xingde; Xie, Huikai

    2015-09-01

    Scanning fiber tips provides the most convenient way for forward-viewing fiber-optic microendoscopy. In this paper, a distal fiber scanning method based on a large-displacement MEMS actuator is presented. A single-mode fiber is glued on the micro-platform of an electrothermal MEMS stage to realize large range non-resonantscanning. The micro-platform has a large piston scan range of up to 800 µm at only 6V. The tip deflection of the fiber can be further amplified by placing the MEMS stage at a proper location along the fiber. A quasi-static model of the fiber-MEMS assembly has been developed and validated experimentally. The frequency response has also been studied and measured. A fiber tip deflection of up to 1650 µm for the 45 mm-long movable fiber portion has been achieved when the MEMS electrothermal stage was placed 25 mm away from the free end. The electrothermally-actuated MEMS stage shows a great potential for forward viewing fiber scanning and optical applications.

  12. 49 CFR 236.327 - Switch, movable-point frog or split-point derail.

    Science.gov (United States)

    2010-10-01

    ... 49 Transportation 4 2010-10-01 2010-10-01 false Switch, movable-point frog or split-point derail..., AND APPLIANCES Interlocking Rules and Instructions § 236.327 Switch, movable-point frog or split-point derail. Switch, movable-point frog, or split-point derail equipped with lock rod shall be maintained so...

  13. Microelectrode studies of dog's gastric mucosa.

    Science.gov (United States)

    Canosa, C A; Rehm, W S

    1968-04-01

    In anesthetized dogs, the potentials in the mucous coat and gastic cells were measured with microelectrodes. In the secreting stomach, with isotonic saline in contact with the mucosal surface, the orientation of the initial change in potential difference (PD) was often the same as that of the liquid junction potential between gastric juice and saline (the microelectrode became negative to a reference electrode in the saline) but the magnitude of the change was never more than 11 mv. On the basis of this finding an explanation is offered for the observation that in the secreting stomach replacing isotonic saline with isotonic HCl as the bathing fluid on the mucosal surface, results in a change in the serosal to mucosal PD of only 19 mv, which is 40% less than the liquid junction potential between gastric juice and saline. In the surface epithelial cells of both resting and secreting stomach, multiple levels of potentials were found. For the secreting stomach, the resistance between the interstitial fluid of the pit region and the fluid on the mucosal surface was 55 ohm cm(2), determined as the change in PD per unit of applied current across stomach. The implications of these findings are discussed with reference to the separate site theory of HCl formation.

  14. Nanostructured gold microelectrodes for extracellular recording

    Energy Technology Data Exchange (ETDEWEB)

    Brueggemann, Dorothea; Wolfrum, Bernhard; Maybeck, Vanessa; Offenhaeusser, Andreas [CNI Center of Nanoelectronic Systems for Information Technology and Institute of Bio- and Nanosystems 2, Forschungszentrum Juelich (Germany)

    2010-07-01

    Electrophysiological activity of electrogenic cells is currently recorded with planar bioelectronic interfaces such as microelectrode arrays (MEAs). In this work, a novel concept of biocompatible nanostructured gold MEAs for extracellular signal recording is presented. MEAs were fabricated using clean room technologies, e.g. photolithography and metallization. Subsequently, they were modified with gold nanopillars of approximately 300 to 400 nm in height and 60 nm width. The nanostructuring process was carried out with a template-assisted approach using nanoporous aluminium oxide. Impedance spectroscopy of the resulting nanostructures showed higher capacitances compared to planar gold. This confirmed the expected increase of the surface area via nanostructuring. We used the nanostructured microelectrodes to record extracellular potentials from heart muscle cells (HL1), which were plated onto the chips. Good coupling between the HL1 cells and the nanostructured electrodes was observed. The resulting signal-to-noise ratio of nanopillar-MEAs was increased by a factor of 2 compared to planar MEAs. In future applications this nanopillar concept can be adopted for distinct interface materials and coupling to cellular and molecular sensing components.

  15. A novel combinational pH-PCO2 microelectrode.

    Science.gov (United States)

    Rao, X; Ma, Y

    1993-07-01

    A novel combinational pH-PCO2 microelectrode based on a neutral carrier hydrogen ion exchanger is described. It is easy to fabricate and allows pH and PCO2 to be measured simultaneously. The microelectrode has a 5-microns tip. The PCO2 microelectrode exhibits a linear response in the range 1.75 x 10(-5)-10(-2) mol/liter with a Nernstian slope of 57.0 mV/decade at 25 degrees C. The detection limit is 10(-5) mol/liter. The pH microelectrode exhibits a linear response in the range pH 4-12 with a Nernstian slope of 60.0 mV/decade at 25 degrees C. The 95% steady-state response time of the PCO2 microelectrode is about 2 min, while it is about 10 s for pH microelectrode. The electromotive force drift is 4.3 mV/h (PCO2) and 2.6 mV/h (pH), respectively. The lifetime is 3 to 4 days. The microelectrode can measure pH and PCO2 in body fluids simultaneously with satisfactory results. It is also a good basic electrode for enzyme microelectrolysis.

  16. Advanced Mechatronics and MEMS Devices

    CERN Document Server

    2013-01-01

    Advanced Mechatronics and MEMS Devicesdescribes state-of-the-art MEMS devices and introduces the latest technology in electrical and mechanical microsystems. The evolution of design in microfabrication, as well as emerging issues in nanomaterials, micromachining, micromanufacturing and microassembly are all discussed at length in this volume. Advanced Mechatronics also provides a reader with knowledge of MEMS sensors array, MEMS multidimensional accelerometer, artificial skin with imbedded tactile components, as well as other topics in MEMS sensors and transducers. The book also presents a number of topics in advanced robotics and an abundance of applications of MEMS in robotics, like reconfigurable modular snake robots, magnetic MEMS robots for drug delivery and flying robots with adjustable wings, to name a few. This book also: Covers the fundamentals of advanced mechatronics and MEMS devices while also presenting new state-of-the-art methodology and technology used in the application of these devices Prese...

  17. Movable intraoperative magnetic resonance imaging incorporating a seismic system.

    Science.gov (United States)

    Akutsu, Hiroyoshi; Yamamoto, Tetsuya; Masuda, Yosuke; Ishikawa, Eiichi; Masumoto, Tomohiko; Matsuda, Masahide; Matsumura, Akira

    2015-08-01

    A high-field ceiling-mounted and movable intraoperative MR imaging (iMRI) can minimize additional risks for MRI and enhance safety by not moving the patient. In this system, hanging the heavy magnet from the ceiling requires structural stability; this stability was confirmed in earlier studies, but not proved during a seismic event. We have installed a 1.5 T movable iMRI system with an incorporated seismic system in our hospital in Japan, a seismic event-prone region. This arrangement is the first in the world, to our knowledge. The objective of this study was to describe the mechanism of this seismic system and the first clinical experience using this system. The seismic system consists of a stabilizer pad that is mounted directly under the magnet, in addition to the structural stability. The seismic system was tested with using a shaker table testing at a test laboratory. Ninety-one patients underwent neurosurgical intervention using this iMRI and seismic system at our hospital. In all patients, intra-, pre, and/or postoperative MR images were successfully obtained, and image quality was excellent. The workflow of moving the magnet and scanning were smooth and unproblematic. We had 169 seismic events in our city during this time period, but had no incidental or accidental events related to the seismic events. With the use of the seismic system, a ceiling-mounted, movable iMRI system can be more safely used. This seismic system may contribute to the spread of movable iMRI systems in countries where seismic events occur. Copyright © 2015 Elsevier B.V. All rights reserved.

  18. Electric potential microelectrode for studies of electrobiogeophysics

    DEFF Research Database (Denmark)

    Damgaard, Lars Riis; Risgaard-Petersen, Nils; Nielsen, Lars Peter

    2014-01-01

    Spatially separated electron donors and acceptors in sediment can be exploited by the so-called “cable bacteria.” Electric potential microelectrodes (EPMs) were constructed to measure the electric fields that should appear when cable bacteria conduct electrons over centimeter distances. The EPMs...... were needle-shaped, shielded Ag/AgCl half-cells that were rendered insensitive to redox-active species in the environment. Tip diameters of 40 to 100 μm and signal resolution of approximately 10 μV were achieved. A test in marine sediments with active cable bacteria showed an electric potential...... increase by approximately 2mV from the sediment-water interface to a depth of approximately 20mm, in accordance with the location and direction of the electric currents estimated from oxygen, pH, and H2S microprofiles. The EPM also captured emergence and decay of electric diffusion potentials...

  19. Carbon fiber on polyimide ultra-microelectrodes

    Science.gov (United States)

    Gillis, Winthrop F.; Lissandrello, Charles A.; Shen, Jun; Pearre, Ben W.; Mertiri, Alket; Deku, Felix; Cogan, Stuart; Holinski, Bradley J.; Chew, Daniel J.; White, Alice E.; Otchy, Timothy M.; Gardner, Timothy J.

    2018-02-01

    Objective. Most preparations for making neural recordings degrade over time and eventually fail due to insertion trauma and reactive tissue response. The magnitudes of these responses are thought to be related to the electrode size (specifically, the cross-sectional area), the relative stiffness of the electrode, and the degree of tissue tolerance for the material. Flexible carbon fiber ultra-microelectrodes have a much smaller cross-section than traditional electrodes and low tissue reactivity, and thus may enable improved longevity of neural recordings in the central and peripheral nervous systems. Only two carbon fiber array designs have been described previously, each with limited channel densities due to limitations of the fabrication processes or interconnect strategies. Here, we describe a method for assembling carbon fiber electrodes on a flexible polyimide substrate that is expected to facilitate the construction of high-density recording and stimulating arrays. Approach. Individual carbon fibers were aligned using an alignment tool that was 3D-printed with sub-micron resolution using direct laser writing. Indium deposition on the carbon fibers, followed by low-temperature microsoldering, provided a robust and reliable method of electrical connection to the polyimide interconnect. Main results. Spontaneous multiunit activity and stimulation-evoked compound responses with SNR  >10 and  >120, respectively, were recorded from a small (125 µm) peripheral nerve. We also improved the typically poor charge injection capacity of small diameter carbon fibers by electrodepositing 100 nm-thick iridium oxide films, making the carbon fiber arrays usable for electrical stimulation as well as recording. Significance. Our innovations in fabrication technique pave the way for further miniaturization of carbon fiber ultra-microelectrode arrays. We believe these advances to be key steps to enable a shift from labor intensive, manual assembly to a more automated

  20. “GEOHeritage” - GIS Based Application for Movable Heritage

    Directory of Open Access Journals (Sweden)

    Albina Moscicka

    2011-12-01

    Full Text Available The paper will present the results of a research project „A methodology for mapping movable heritage”.  This project, financed by the Polish Ministry of Science and Higher Education in 2008-2010, was realized by the Institute of Geodesy and Cartography in cooperation with the Research and Academic Computer Network (portal Polska.pl, the Central Archives of Historical Records and Department of Art History of the Wroclaw University. The idea of the project was to simplify access to digital movable cultural heritage by the use of spatial information. The main aspect of the project was to use a Geographic Information System (GIS - as a technology and as a tool - to integrate different digital collections, present their content in one space and provide online access to them from one common level – from an online map. The essence of the research was to present on the online map movable monument as multi-spatial object. The base of this assumption is that most of monuments, especially movable ones, can have several places in the geographical space that are connected with them (several various space relations. As a rule archival documents were created in one place, describe the other, today can be kept in places far away from the place they were prepared, and what more the parts of the same collection can be kept in different archives. Moreover, one single document can be connected or have relations (typological, thematically, temporal, spatial with other relations to the same or the other one. The reason for it is that documents concerning various places are housed in the same archive, various documents can present the same place or the place of creating particular document can be the place of housing another. In the project the basic source material was digital collections of original records. Their metadata defined in the international standards of monuments’ description were used for connecting digital monuments with the geographic space

  1. Piezoelectric MEMS resonators

    CERN Document Server

    Piazza, Gianluca

    2017-01-01

    This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associate...

  2. EDITORIAL: International MEMS Conference 2006

    Science.gov (United States)

    Tay, Francis E. H.; Jianmin, Miao; Iliescu, Ciprian

    2006-04-01

    The International MEMS conference (iMEMS2006) organized by the Institute of Bioengineering and Nanotechnology and Nanyang Technological University aims to provide a platform for academicians, professionals and industrialists in various related fields from all over the world to share and learn from each other. Of great interest is the incorporation of the theme of life sciences application using MEMS. It is the desire of this conference to initiate collaboration and form network of cooperation. This has continued to be the objective of iMEMS since its inception in 1997. The technological advance of MEMS over the past few decades has been truly exciting in terms of development and applications. In order to participate in this rapid development, a conference involving delegates from within the MEMS community and outside the community is very meaningful and timely. With the receipt of over 200 articles, delegates related to MEMS field from all over the world will share their perspectives on topics such as MEMS/MST Design, MEMS Teaching and Education, MEMS/MST Packaging, MEMS/MST Fabrication, Microsystems Applications, System Integration, Wearable Devices, MEMSWear and BioMEMS. Invited speakers and delegates from outside the field have also been involved to provide challenges, especially in the life sciences field, for the MEMS community to potentially address. The proceedings of the conference will be published as an issue in the online Journal of Physics: Conference Series and this can reach a wider audience and will facilitate the reference and citation of the work presented in the conference. We wish to express our deep gratitude to the International Scientific Committee members and the organizing committee members for contributing to the success of this conference. We would like to thank all the delegates, speakers and sponsors from all over the world for presenting and sharing their perspectives on topics related to MEMS and the challenges that MEMS can

  3. Ultrasensitive electrochemical biomolecular detection using nanostructured microelectrodes.

    Science.gov (United States)

    Sage, Andrew T; Besant, Justin D; Lam, Brian; Sargent, Edward H; Kelley, Shana O

    2014-08-19

    Electrochemical sensors have the potential to achieve sensitive, specific, and low-cost detection of biomolecules--a capability that is ever more relevant to the diagnosis and monitored treatment of disease. The development of devices for clinical diagnostics based on electrochemical detection could provide a powerful solution for the routine use of biomarkers in patient treatment and monitoring and may overcome the many issues created by current methods, including the long sample-to-answer times, high cost, and limited prospects for lab-free use of traditional polymerase chain reaction, microarrays, and gene-sequencing technologies. In this Account, we summarize the advances in electrochemical biomolecular detection, focusing on a new and integrated platform that exploits the bottom-up fabrication of multiplexed electrochemical sensors composed of electrodeposited noble metals. We trace the evolution of these sensors from gold nanoelectrode ensembles to nanostructured microelectrodes (NMEs) and discuss the effects of surface morphology and size on assay performance. The development of a novel electrocatalytic assay based on Ru(3+) adsorption and Fe(3+) amplification at the electrode surface as a means to enable ultrasensitive analyte detection is discussed. Electrochemical measurements of changes in hybridization events at the electrode surface are performed using a simple potentiostat, which enables integration into a portable, cost-effective device. We summarize the strategies for proximal sample processing and detection in addition to those that enable high degrees of sensor multiplexing capable of measuring 100 different analytes on a single chip. By evaluating the cost and performance of various sensor substrates, we explore the development of practical lab-on-a-chip prototype devices. By functionalizing the NMEs with capture probes specific to nucleic acid, small molecule, and protein targets, we can successfully detect a wide variety of analytes at

  4. Integrated design of MEMS

    DEFF Research Database (Denmark)

    De Grave, Arnaud; Brissaud, Daniel

    2007-01-01

    . Manufacturing is mainly coming from the silicon industry. Our interest is to highlight the differences between designing MEMS and designing classical ICs or mechanical devices, to propose new methods and aided-tools supporting the design process. Our methodology is based on an ethnographic approach through...

  5. Photonic MEMS switch applications

    Science.gov (United States)

    Husain, Anis

    2001-07-01

    As carriers and service providers continue their quest for profitable network solutions, they have shifted their focus from raw bandwidth to rapid provisioning, delivery and management of revenue generating services. Inherently transparent to data rate the transmission wavelength and data format, MEMS add scalability, reliability, low power and compact size providing flexible solutions to the management and/or fiber channels in long haul, metro, and access networks. MEMS based photonic switches have gone from the lab to commercial availability and are now currently in carrier trials and volume production. 2D MEMS switches offer low up-front deployment costs while remaining scalable to large arrays. They allow for transparent, native protocol transmission. 2D switches enable rapid service turn-up and management for many existing and emerging revenue rich services such as storage connectivity, optical Ethernet, wavelength leasing and optical VPN. As the network services evolve, the larger 3D MEMS switches, which provide greater scalability and flexibility, will become economically viable to serve the ever-increasing needs.

  6. Microelectromechanical Systems (MEMS)

    Indian Academy of Sciences (India)

    As a field, Microelectromechanical Systems (MEMS) has matured over the last two decades to have several scientific journals dedicated to it. These journals are instrumental in bringing out the interdisciplinary nature of research that the field demands. In the beginning, most papers were process centric where realization of ...

  7. MEMS Solar Generators

    OpenAIRE

    Grbovic, Dragoslav; Osswald, Sebastian

    2011-01-01

    Approved for public release; distribution is unlimited Using MEMS bimaterial structures to build highly efficient solar energy generators. This is a novel approach that utilizes developments in the area of bimaterial sensors and applies them in the field of solar energy harvesting.

  8. Fatigue Design and Prevention in Movable Scaffolding Systems

    Science.gov (United States)

    Coelho, Hugo; Torres, Alberto; Pacheco, Pedro; Moreira, Cristiano; Silva, Rute; Soares, José M.; Pinto, Dânia

    2017-06-01

    The Movable Scaffolding System (MSS) is a heavy construction equipment used for casting situ of concrete bridge decks. In the past decades, MSSs have become increasingly complex and industrialized, enlarging its span ranges, incorporating auxiliary elevation machinery and increasing productivity. The tendency nowadays is for strong reutilization and the notion of MSS as a disposable or temporary structure is somehow reductive. The main structure of MSSs may be potentially exposed to fatigue, usually characterized by low number of cycles with significant stress amplitude. Fatigue may be prevented through adequate design; judicious selection of materials; demanding quality control and implementation of robust inspection and maintenance plans.

  9. Design of movable fixed area γ dose rate monitor

    International Nuclear Information System (INIS)

    Li Dongyu; Cheng Wen; Li Jikai; Huang Hong; Shen Qiming; Zhang Qiang; Liu Zhengshan

    2005-10-01

    Movable fixed area γ dose rate monitor has not only the characteristics of fixed area γ dose rate monitor, but that of portable meter as well. Its main function is to monitor the areas where dose rate would change without orderliness to prevent unplanned radiation exposure accidents from happening. The design way of the monitor, the main indicators description, the working principle and the comprising of software and hardware are briefly introduced. The monitor has the characteristics of simple installation, easy maintenance, little power consumption, wide range, notability of visual and audible alarm and so on. Its design and technique have novelty and advancement. (authors)

  10. On demand polarimetry using a movable microgrid polarizer

    Science.gov (United States)

    King, Page E.; Fest, Eric C.

    2015-09-01

    A movable pixelated filter array is proposed to provide low cost, on demand polarimetry and wavefront sensing. With this concept, an optical system can turn polarimetry on and off by using a shutter to move a microgrid polarizer array in and out of the optical path of the system. This allows an optical system to operate in two modes, a non-polarimetric mode in which sensor range is maintained, and a polarimetric mode in which it is reduced. In implementing this concept, adequate knowledge of the position of the filter in the optical path and calibration procedures become critical topics. This paper discusses simulated and hardware-tested results of this invention.

  11. The Movable Type Method Applied to Protein-Ligand Binding.

    Science.gov (United States)

    Zheng, Zheng; Ucisik, Melek N; Merz, Kenneth M

    2013-12-10

    Accurately computing the free energy for biological processes like protein folding or protein-ligand association remains a challenging problem. Both describing the complex intermolecular forces involved and sampling the requisite configuration space make understanding these processes innately difficult. Herein, we address the sampling problem using a novel methodology we term "movable type". Conceptually it can be understood by analogy with the evolution of printing and, hence, the name movable type. For example, a common approach to the study of protein-ligand complexation involves taking a database of intact drug-like molecules and exhaustively docking them into a binding pocket. This is reminiscent of early woodblock printing where each page had to be laboriously created prior to printing a book. However, printing evolved to an approach where a database of symbols (letters, numerals, etc.) was created and then assembled using a movable type system, which allowed for the creation of all possible combinations of symbols on a given page, thereby, revolutionizing the dissemination of knowledge. Our movable type (MT) method involves the identification of all atom pairs seen in protein-ligand complexes and then creating two databases: one with their associated pairwise distant dependent energies and another associated with the probability of how these pairs can combine in terms of bonds, angles, dihedrals and non-bonded interactions. Combining these two databases coupled with the principles of statistical mechanics allows us to accurately estimate binding free energies as well as the pose of a ligand in a receptor. This method, by its mathematical construction, samples all of configuration space of a selected region (the protein active site here) in one shot without resorting to brute force sampling schemes involving Monte Carlo, genetic algorithms or molecular dynamics simulations making the methodology extremely efficient. Importantly, this method explores the free

  12. Characterization of assembled MEMS

    Science.gov (United States)

    Jandric, Zoran; Randall, John N.; Saini, Rahul; Nolan, Michael; Skidmore, George

    2005-01-01

    Zyvex is developing a low-cost high-precision method for manufacturing MEMS-based three-dimensional structures/assemblies. The assembly process relies on compliant properties of the interconnecting components. The sockets and connectors are designed to benefit from their compliant nature by allowing the mechanical component to self-align, i.e. reposition themselves to their designed, stable position, independent of the initial placement of the part by the external robot. Thus, the self-aligning property guarantees the precision of the assembled structure to be very close to, or the same, as the precision of the lithography process itself. A three-dimensional (3D) structure is achieved by inserting the connectors into the sockets through the use of a passive end-effector. We have developed the automated, high-yield, assembly procedure which permits connectors to be picked up from any location within the same die, or a separate die. This general procedure allows for the possibility to assemble parts of dissimilar materials. We have built many 3D MEMS structures, including several 3D MEMS devices such as a scanning electron microscope (SEM) micro column, mass-spectrometer column, variable optical attenuator. For these 3D MEMS structures we characterize their mechanical strength through finite element simulation, dynamic properties by finite-element analysis and experimentally with UMECH"s MEMS motion analyzer (MMA), alignment accuracy by using an in-house developed dihedral angle measurement laser autocollimator, and impact properties by performing drop tests. The details of the experimental set-ups, the measurement procedures, and the experimental data are presented in this paper.

  13. European MEMS foundries

    Science.gov (United States)

    Salomon, Patric R.

    2003-01-01

    According to the latest release of the NEXUS market study, the market for MEMS or Microsystems Technology (MST) is predicted to grow to $68B by the year 2005, with systems containing these components generating even higher revenues and growth. The latest advances in MST/MEMS technology have enabled the design of a new generation of microsystems that are smaller, cheaper, more reliable, and consume less power. These integrated systems bring together numerous analog/mixed signal microelectronics blocks and MEMS functions on a single chip or on two or more chips assembled within an integrated package. In spite of all these advances in technology and manufacturing, a system manufacturer either faces a substantial up-front R&D investment to create his own infrastructure and expertise, or he can use design and foundry services to get the initial product into the marketplace fast and with an affordable investment. Once he has a viable product, he can still think about his own manufacturing efforts and investments to obtain an optimized high volume manufacturing for the specific product. One of the barriers to successful exploitation of MEMS/MST technology has been the lack of access to industrial foundries capable of producing certified microsystems devices in commercial quantities, including packaging and test. This paper discusses Multi-project wafer (MPW) runs, requirements for foundries and gives some examples of foundry business models. Furthermore, this paper will give an overview on MST/MEMS services that are available in Europe, including pure commercial activities, European project activities (e.g. Europractice), and some academic services.

  14. MEMS-based system and image processing strategy for epiretinal prosthesis.

    Science.gov (United States)

    Xia, Peng; Hu, Jie; Qi, Jin; Gu, Chaochen; Peng, Yinghong

    2015-01-01

    Retinal prostheses have the potential to restore some level of visual function to the patients suffering from retinal degeneration. In this paper, an epiretinal approach with active stimulation devices is presented. The MEMS-based processing system consists of an external micro-camera, an information processor, an implanted electrical stimulator and a microelectrode array. The image processing strategy combining image clustering and enhancement techniques was proposed and evaluated by psychophysical experiments. The results indicated that the image processing strategy improved the visual performance compared with direct merging pixels to low resolution. The image processing methods assist epiretinal prosthesis for vision restoration.

  15. Electrostatic Spray Deposition-Based Manganese Oxide Films—From Pseudocapacitive Charge Storage Materials to Three-Dimensional Microelectrode Integrands

    Directory of Open Access Journals (Sweden)

    Richa Agrawal

    2017-07-01

    Full Text Available In this study, porous manganese oxide (MnOx thin films were synthesized via electrostatic spray deposition (ESD and evaluated as pseudocapacitive electrode materials in neutral aqueous media. Very interestingly, the gravimetric specific capacitance of the ESD-based electrodes underwent a marked enhancement upon electrochemical cycling, from 72 F∙g−1 to 225 F∙g−1, with a concomitant improvement in kinetics and conductivity. The change in capacitance and resistivity is attributed to a partial electrochemical phase transformation from the spinel-type hausmannite Mn3O4 to the conducting layered birnessite MnO2. Furthermore, the films were able to retain 88.4% of the maximal capacitance after 1000 cycles. Upon verifying the viability of the manganese oxide films for pseudocapacitive applications, the thin films were integrated onto carbon micro-pillars created via carbon microelectromechanical systems (C-MEMS for examining their application as potential microelectrode candidates. In a symmetric two-electrode cell setup, the MnOx/C-MEMS microelectrodes were able to deliver specific capacitances as high as 0.055 F∙cm−2 and stack capacitances as high as 7.4 F·cm−3, with maximal stack energy and power densities of 0.51 mWh·cm−3 and 28.3 mW·cm−3, respectively. The excellent areal capacitance of the MnOx-MEs is attributed to the pseudocapacitive MnOx as well as the three-dimensional architectural framework provided by the carbon micro-pillars.

  16. MEMS CLOSED CHAMBER HEAT ENGINE AND ELECTRIC GENERATOR

    Science.gov (United States)

    Landis, Geoffrey A. (Inventor)

    2005-01-01

    A heat engine, preferably combined with an electric generator, and advantageously implemented using micro-electromechanical system (MEMS) technologies as an array of one or more individual heat engine/generators. The heat engine is based on a closed chamber containing a motive medium, preferably a gas; means for alternately enabling and disabling transfer of thermal energy from a heat source to the motive medium; and at least one movable side of the chamber that moves in response to thermally-induced expansion and contraction of the motive medium, thereby converting thermal energy to oscillating movement. The electrical generator is combined with the heat engine to utilize movement of the movable side to convert mechanical work to electrical energy, preferably using electrostatic interaction in a generator capacitor. Preferably at least one heat transfer side of the chamber is placed alternately into and out of contact with the heat source by a motion capacitor, thereby alternately enabling and disabling conductive transfer of heat to the motive medium.

  17. Design and Simulation of RF MEMS Switch for Wireless Communication Applications

    Directory of Open Access Journals (Sweden)

    Girija Sravani K.

    2015-12-01

    Full Text Available In this paper, we have reported the design and analysis of a novel bulk-silicon fabricated RF MEMS capacitive switch. This RF switch has a short response time, low power consumption, and an IC compatible design. To lower the driving voltage and insertion loss, multiple geometries for the movable beam, membrane, and air gap are investigated using Software tool Comsol Multiphysics. Potential thermal stresses and deflection of the cantilever due to the application of forces have been investigated. Performance of the device under the application of forces also studied using the software.

  18. A new moving-coil microelectrode puller.

    Science.gov (United States)

    Ensor, D R

    1979-03-01

    This paper describes an improved electrode puller for the manufacture of glass microelectrodes or micropipettes. The instrument resembles a conventional horizontal two-stage, solenoid-powered electrode puller but the pull is now developed by a light moving-coil and a fixed permanent magnet, using the principle of the moving-coil loudspeaker. In a conventional puller the force is generated by a solenoid with a massive moving-iron core. In this new puller the moving-coil solenoid responds much more rapidly to changing currents because of its greatly reduced inductance, and a substantial reduction in mass to 25 g, gives more acceleration from a comparable force. The sudden discharge of a capacitor bank through the coil accelerates the glass quickly during the last stage of the pull. This rapid acceleration is of importance in the formation of good electrodes with fine tips. For the prototype, an electronic control unit was constructed which allows the parameters necessary for the manufacture of electrodes to be set and regulated accurately and repeatedly, so that series of electrodes of constant shapes can be made. The length of the electrode shank may be predetermined over a wide range and tip diameters down to 0.08 micron have already been measured. The angle of the taper that supports the tip may be varied from less than 1 to over 6 degrees. The mechanical design of the instrument is comparatively simple, as it has only one moving part, while the relative complexity of the electronic control section should not present any manufacturing difficulties. Although this puller has been used mainly to make single-barrel fine electrodes from borosilicate glass, it is adaptable for other purposes. The extent of the control over the shape of the shank of the electrode renders it particularly suitable for the manufacture of composite, ion-sensitive electrodes.

  19. Memória

    OpenAIRE

    Carlos Alberto Mourão Júnior; Nicole Costa Faria

    2015-01-01

    ResumoEste artigo tem como objetivo central apresentar os processos de memória de maneira didática, proporcionando aos alunos e futuros pesquisadores um primeiro contato satisfatório com o tema. Já há algum tempo, tem sido observada a ocorrência de confusões conceituais e metodológicas no campo da neurociência cognitiva, tanto em relação à memória quanto em relação às outras funções psicológicas básicas. Neste ensaio, alguns conceitos principais são esclarecidos. É apresentada uma classificaç...

  20. Introduction - MEMS Aerospace Applications

    Science.gov (United States)

    2004-02-01

    Advanced Materials and Fabrication Methods Commercial MEMS-based Products I-15 Digital Micromirrors for Sub-portable Projectors PLUS U3-880 • 2.9 lbs • 1.9...x 9” x 7” •SVGA (800 x 600) 10 um I-16 Digital Mirror Display (DMD) Texas Instruments, Inc. I-17 Micro flow-diffusion analysis system flow-diffusion

  1. A microelectrode array electrodeposited with reduced graphene oxide and Pt nanoparticles for norepinephrine and electrophysiological recordings

    Science.gov (United States)

    Wang, Li; Song, Yilin; Zhang, Yu; Xu, Shengwei; Xu, Huiren; Wang, Mixia; Wang, Yang; Cai, Xinxia

    2017-11-01

    Norepinephrine (NE), a common neurotransmitter released by locus coeruleus neurons, plays an essential role in the communication mechanism of the mammalian nervous system. In this work, a microelectrode array (MEA) was fabricated by micro-electromechanical system (MEMS) technology to provide a rapid, sensitive and reliable method for the direct determination in NE dynamic secretion. To improve the electrical performance, the MEA was electrodeposited with the reduced graphene oxide and Pt nanoparticles (rGOPNps). rGOPNps-MEA was investigated using scanning electron microscopy, atomic force microscopy and electrochemical impedance spectroscopy, differential pulse voltammetry exhibited remarkably electrocatalytic properties towards NE. Calibration results showed a sensitivity of 1.03 nA µM-1 to NE with a detection limit of 0.08 µM. In Particular, the MEA was successfully used for measuring dynamic extracellular NE secretion from the locus coeruleus brain slice, as well as monitoring spike firing from the hippocampal brain slice. This fabricated device has potential in studies of spatially resolved delivery of trace neurochemicals and electrophysiological activities of a variety of biological tissues in vitro.

  2. Glass pipette-carbon fiber microelectrodes for evoked potential recordings

    Directory of Open Access Journals (Sweden)

    Moraes M.F.D.

    1997-01-01

    Full Text Available Current methods for recording field potentials with tungsten electrodes make it virtually impossible to use the same recording electrode also as a lesioning electrode, for example for histological confirmation of the recorded site, because the lesioning procedure usually wears off the tungsten tip. Therefore, the electrode would have to be replaced after each lesioning procedure, which is a very high cost solution to the problem. We present here a low cost, easy to make, high quality glass pipette-carbon fiber microelectrode that shows resistive, signal/noise and electrochemical coupling advantages over tungsten electrodes. Also, currently used carbon fiber microelectrodes often show problems with electrical continuity, especially regarding electrochemical applications using a carbon-powder/resin mixture, with consequent low performance, besides the inconvenience of handling such a mixture. We propose here a new method for manufacturing glass pipette-carbon fiber microelectrodes with several advantages when recording intracerebral field potentials

  3. Modeling and Simulation of Microelectrode-Retina Interactions

    Energy Technology Data Exchange (ETDEWEB)

    Beckerman, M

    2002-11-30

    The goal of the retinal prosthesis project is the development of an implantable microelectrode array that can be used to supply visually-driven electrical input to cells in the retina, bypassing nonfunctional rod and cone cells, thereby restoring vision to blind individuals. This goal will be achieved through the study of the fundamentals of electrical engineering, vision research, and biomedical engineering with the aim of acquiring the knowledge needed to engineer a high-density microelectrode-tissue hybrid sensor that will restore vision to millions of blind persons. The modeling and simulation task within this project is intended to address the question how best to stimulate, and communicate with, cells in the retina using implanted microelectrodes.

  4. Combined Reactor and Microelectrode Measurements in Laboratory Grown Biofilms

    DEFF Research Database (Denmark)

    Larsen, Tove; Harremoës, Poul

    1994-01-01

    A combined biofilm reactor-/microelectrode experimental set-up has been constructed, allowing for simultaneous reactor mass balances and measurements of concentration profiles within the biofilm. The system consists of an annular biofilm reactor equipped with an oxygen microelectrode. Experiments...... were carried out with aerobic glucose and starch degrading biofilms. The well described aerobic glucose degradation biofilm system was used to test the combined reactor set-up. Results predicted from known biofilm kinetics were obtained. In the starch degrading biofilm, basic assumptions were tested...... with the microelectrode measurements. It was established, that even with a high molecular weight, non-diffusible substrate, degradation took place in the depths of the biofilm. Intrinsic enzymatic hydrolysis was not limiting and the volumetric removal rate of oxygen was zero order....

  5. The Power of Collateral : How Problems in Securing Transections Limit Private Credit from Movable Property

    OpenAIRE

    Fleisig, Heywood

    1995-01-01

    In many developing countries, faulty laws and regulations make it hard to use livestock, machines, equipment, standing crops, and other movable property as collateral. The resulting constraints on access to credit hurt economies. In Bolivia, for example, a faulty legal and regulatory framework for the use of movable property as collateral has led to a loss in GDP estimated at between 5 and...

  6. Dynamic posturography using a new movable multidirectional platform driven by gravity.

    NARCIS (Netherlands)

    Commissaris, D.A.C.M.; Nieuwenhuijzen, P.H.J.A.; Overeem, S.; Vos, A. de; Duysens, J.E.J.; Bloem, B.R.

    2002-01-01

    Human upright balance control can be quantified using movable platforms driven by servo-controlled torque motors (dynamic posturography). We introduce a new movable platform driven by the force of gravity acting upon the platform and the subject standing on it. The platform consists of a 1 m2 metal

  7. Dynamic posturography using a new movable multidirectional platform driven by gravity

    NARCIS (Netherlands)

    Commissaris, D.A.C.M.; Nieuwenhuijzen, P.H.J.A.; Overeem, S.; Vos, A. de; Duysens, J.E.J.; Bloem, B.R.

    2002-01-01

    Human upright balance control can be quantified using movable platforms driven by servo-controlled torque motors (dynamic posturography). We introduce a new movable platform driven by the force of gravity acting upon the platform and the subject standing on it. The platform consists of a 1 m(2)

  8. 49 CFR 236.312 - Movable bridge, interlocking of signal appliances with bridge devices.

    Science.gov (United States)

    2010-10-01

    ... 49 Transportation 4 2010-10-01 2010-10-01 false Movable bridge, interlocking of signal appliances with bridge devices. 236.312 Section 236.312 Transportation Other Regulations Relating to... SYSTEMS, DEVICES, AND APPLIANCES Interlocking Standards § 236.312 Movable bridge, interlocking of signal...

  9. MEMS Reaction Control and Maneuvering for Picosat Beyond LEO

    Science.gov (United States)

    Alexeenko, Alina

    2016-01-01

    The MEMS Reaction Control and Maneuvering for Picosat Beyond LEO project will further develop a multi-functional small satellite technology for low-power attitude control, or orientation, of picosatellites beyond low Earth orbit (LEO). The Film-Evaporation MEMS Tunable Array (FEMTA) concept initially developed in 2013, is a thermal valving system which utilizes capillary forces in a microchannel to offset internal pressures in a bulk fluid. The local vapor pressure is increased by resistive film heating until it exceeds meniscus strength in a nozzle which induces vacuum boiling and provides a stagnation pressure equal to vapor pressure at that point which is used for propulsion. Interplanetary CubeSats can utilize FEMTA for high slew rate attitude corrections in addition to desaturating reaction wheels. The FEMTA in cooling mode can be used for thermal control during high-power communication events, which are likely to accompany the attitude correction. Current small satellite propulsion options are limited to orbit correction whereas picosatellites are lacking attitude control thrusters. The available attitude control systems are either quickly saturated reaction wheels or movable high drag surfaces with long response times.

  10. Safety Performance Evaluations for the Vehicle Based Movable Barriers Using Full Scale Crash Tests

    Directory of Open Access Journals (Sweden)

    Jin Minsoo

    2017-01-01

    Full Text Available The present study aims to develop a prototype of large-size movable barriers to protect roadside workers from incoming vehicles to the road work area with the following functions: maximization of work space in the right and left directions, convenient mobility, and minimization of impact without modification of the inside of movable barriers into traffic lanes and perform safety performance assessment on passengers through full scale crash tests. The large movable barrier was divided into folder type and telescope type and the development stage was now at the prototype phase. A full scale crash test was conducted prior to certification test at a level of 90%. The full scale crash test result showed that both types of folder type movable barrier and telescope type movable barrier satisfied the standard of the passenger safety performance evaluation at a level of 90%.

  11. Topological design of compliant smart structures with embedded movable actuators

    Science.gov (United States)

    Wang, Yiqiang; Luo, Zhen; Zhang, Xiaopeng; Kang, Zhan

    2014-04-01

    In the optimal configuration design of piezoelectric smart structures, it is favorable to use actuation elements with certain predefined geometries from the viewpoint of manufacturability of fragile piezoelectric ceramics in practical applications. However, preserving the exact shape of these embedded actuators and tracking their dynamic motions presents a more challenging research task than merely allowing them to take arbitrary shapes. This paper proposes an integrated topology optimization method for the systematic design of compliant smart structures with embedded movable PZT (lead zirconate titanate) actuators. Compared with most existing studies, which either optimize positions/sizes of the actuators in a given host structure or design the host structure with pre-determined actuator locations, the proposed method simultaneously optimizes the positions of the movable PZT actuators and the topology of the host structure, typically a compliant mechanism for amplifying the small strain stroke. A combined topological description model is employed in the optimization, where the level set model is used to track the movements of the PZT actuators and the independent point-wise density interpolation (iPDI) approach is utilized to search for the optimal topology of the host structure. Furthermore, we define an integral-type constraint function to prevent overlaps between the PZT actuators and between the actuators and the external boundaries of the design domain. Such a constraint provides a unified and explicit mathematical statement of the non-overlap condition for any number of arbitrarily shaped embedded actuators. Several numerical examples are used to demonstrate the effectiveness of the proposed optimization method.

  12. Electromagnetic actuation in MEMS switches

    DEFF Research Database (Denmark)

    Oliveira Hansen, Roana Melina de; Mátéfi-Tempfli, Mária; Chemnitz, Steffen

    . Electromagnetic actuation is a very promising approach to operate such MEMS and Power MEMS devices, due to the long range, reproducible and strong forces generated by this method, among other advantages. However, the use of electromagnetic actuation in such devices requires the use of thick magnetic films, which...

  13. Topology optimized RF MEMS switches

    DEFF Research Database (Denmark)

    Philippine, M. A.; Zareie, H.; Sigmund, Ole

    2013-01-01

    Topology optimization is a rigorous and powerful method that should become a standard MEMS design tool - it can produce unique and non-intuitive designs that meet complex objectives and can dramatically improve the performance and reliability of MEMS devices. We present successful uses of topolog...

  14. Integrated microphotonic-MEMS inertial sensors

    Science.gov (United States)

    Zandi, Kazem

    The objective of this thesis is to design, simulate, fabricate and characterize high sensitive low cost in-plane photonic-band-gap (PBG)-micro electromechanical systems (MEMS)-based miniature accelerometers and rotational rate sensors (gyroscopes) on a silicon-on-insulator (SOI) substrate in order to enable the integration of an array of two-axis of these sensors on a single SOI platform. Use of guided-wave optical devices integrated with MEMS on SOI for multichannel/multifunction sensor systems allows the use of multiple sensors to extend the measurement range and accuracy. This provides essential redundancy which makes long-term reliability in the space environment possible therefore reducing the possibility of system failure. The navigator microchip also represents the ability of accommodating diverse attitude and inertial sensors on the same microchip to eliminate the need of many separate sensors. The end product exhibits orders of magnitude reduction in system mass and size. Furthermore, redundancy improves the net performance and precision of the navigation measurement systems. Two classes of optical accelerometers/gyroscopes are considered in this thesis for application in smallsats navigation, one based on tunable Fabry-Perot (FP) filter, where the sensor is actuated by the applied acceleration providing a shift in the operating wavelength that varies linearly with the applied acceleration and the other one based on variable optical attenuator (VOA), where the sensor is actuated by the applied acceleration providing a linear change for small displacements around the waveguide propagation axis in the relative signal intensity with the applied acceleration. In the case of FP-based sensors, the FP microcavity consists of two distributed Bragg reflectors (DBR) in which one DBR mirror is attached to the proof mass of the system. As a consequence of acceleration/rotation, the relative displacement of the movable mirror with respect to the fixed mirror changes

  15. Mems cost analysis from laboratory to industry

    CERN Document Server

    Freng, Ron Lawes

    2016-01-01

    The World of MEMS; Chapter 2: Basic Fabrication Processes; Chapter 3: Surface Microengineering. High Aspect Ratio Microengineering; Chapter 5: MEMS Testing; Chapter 6: MEMS Packaging. Clean Rooms, Buildings and Plant; Chapter 8: The MEMSCOST Spreadsheet; Chapter 9: Product Costs - Accelerometers. Product Costs - Microphones. MEMS Foundries. Financial Reporting and Analysis. Conclusions.

  16. MEMS cost analysis from laboratory to industry

    CERN Document Server

    Freng, Ron Lawes

    2016-01-01

    The World of MEMS; Chapter 2: Basic Fabrication Processes; Chapter 3: Surface Microengineering. High Aspect Ratio Microengineering; Chapter 5: MEMS Testing; Chapter 6: MEMS Packaging. Clean Rooms, Buildings and Plant; Chapter 8: The MEMSCOST Spreadsheet; Chapter 9: Product Costs - Accelerometers. Product Costs - Microphones. MEMS Foundries. Financial Reporting and Analysis. Conclusions.

  17. Multi-microelectrode devices for intrafascicular use in peripheral nerve

    NARCIS (Netherlands)

    Rutten, Wim

    1996-01-01

    This minisymposium paper gives an overview of experimental, modeling, design and microfabrication steps which lead towards the University of Twente three-dimensional 128-fold silicon microelectrode device. The device is meant for implantation in peripheral nerve for neuromuscular control purposes

  18. AFM cantilever with in situ renewable mercury microelectrode

    NARCIS (Netherlands)

    Schön, Peter Manfred; Geerlings, J.; Tas, Niels Roelof; Sarajlic, Edin

    2013-01-01

    We report here first results obtained on a novel, in situ renewable mercury microelectrode integrated into an atomic force microscopy (AFM) cantilever. Our approach is based on a fountain pen probe with appropriate dimensions enabling reversible filling with(nonwetting) mercury under changing the

  19. Integration of Polymer Micro-Electrodes for Bio-Sensing

    DEFF Research Database (Denmark)

    Argyraki, Aikaterini; Larsen, Simon Tylsgaard; Tanzi, Simone

    We present the fabrication of PEDOT and pyrolyzed micro-electrodes for the detection of neurotransmitter exocytosis from single cells. The patterns of the electrodes are defined with photolithography. The micro-electro-fluidic-chips were fabricated by bonding two injection molded TOPAS parts...

  20. Microelectrodes as novel research tools for environmental biofilm studies

    International Nuclear Information System (INIS)

    Yu, T.; Lu, R.; Bishop, L.

    2002-01-01

    Biofilm processes are widely utilized in environmental engineering for biodegradation of contaminated waters, gases and soils. It is important to understand the structure and functions of biofilms. Microelectrodes are novel experimental tools for environmental biofilm studies. The authors reviewed the techniques of oxygen, sulfide, redox potential and pH microelectrode. These microelectrodes have tip diameters of 3 to 20 μm, resulting a high spatial resolution. They enable us directly measure the chemical conditions as results of microbial activities in biofilms. The authors also reported the laboratory and field studies of wastewater biofilms using microelectrode techniques. The results of these studies provided experimental evidence on the stratification of microbial processes and the associated redox potential change in wastewater biofilms: (1) The oxygen penetration depth was only a fraction of the biofilm thickness. This observation, first made under laboratory conditions, has been confirmed under field conditions. (2) The biofilms with both aerobic oxidation and sulfate reduction had a clearly stratified structure. This was evidenced by a sharp decrease of redox potential near the interface between the aerobic zone and the sulfate reduction zone within the biofilm. In this type of biofilms, aerobic oxidation took place only in a shallow layer near the biofilm surface and sulfate reduction occurred in the deeper anoxic zone. (3) The redox potential changed with the shift of primary microbial process in biofilms, indicating that it is possible to use redox potential to help illustrate the structure and functions of biofilms. (author)

  1. Signal distortion from microelectrodes in clinical EEG acquisition systems

    Science.gov (United States)

    Stacey, William C.; Kellis, Spencer; Patel, Paras R.; Greger, Bradley; Butson, Christopher R.

    2012-10-01

    Many centers are now using high-density microelectrodes during traditional intracranial electroencephalography (iEEG) both for research and clinical purposes. These microelectrodes are FDA-approved and integrate into clinical EEG acquisition systems. However, the electrical characteristics of these electrodes are poorly described and clinical systems were not designed to use them; thus, it is possible that this shift into clinical practice could have unintended consequences. In this study, we characterized the impedance of over 100 commercial macro- and microelectrodes using electrochemical impedance spectroscopy (EIS) to determine how electrode properties could affect signal acquisition and interpretation. The EIS data were combined with the published specifications of several commercial EEG systems to design digital filters that mimic the behavior of the electrodes and amplifiers. These filters were used to analyze simulated brain signals that contain a mixture of characteristic features commonly observed in iEEG. Each output was then processed with several common quantitative EEG measurements. Our results show that traditional macroelectrodes had low impedances and produced negligible distortion of the original signal. Brain tissue and electrical wiring also had negligible filtering effects. However, microelectrode impedances were much higher and more variable than the macroelectrodes. When connected to clinical amplifiers, higher impedance electrodes produced considerable distortion of the signal at low frequencies (impedance of at least 1 GΩ, which is much higher than most clinical systems. These results show that it is critical to account for variations in impedance when analyzing EEG from different-sized electrodes. Data from microelectrodes may yield misleading results unless recorded with high-impedance amplifiers.

  2. Evaluation of microelectrode materials for direct-current electrocorticography

    Science.gov (United States)

    Li, Chunyan; Narayan, Raj K.; Wu, Pei-Ming; Rajan, Neena; Wu, Zhizhen; Mehan, Neal; Golanov, Eugene V.; Ahn, Chong H.; Hartings, Jed A.

    2016-02-01

    Objective. Direct-current electrocorticography (DC-ECoG) allows a more complete characterization of brain states and pathologies than traditional alternating-current recordings (AC-ECoG). However, reliable recording of DC signals is challenging because of electrode polarization-induced potential drift, particularly at low frequencies and for more conducting materials. Further challenges arise as electrode size decreases, since impedance is increased and the potential drift is augmented. While microelectrodes have been investigated for AC-ECoG recordings, little work has addressed microelectrode properties for DC-signal recording. In this paper, we investigated several common microelectrode materials used in biomedical application for DC-ECoG. Approach. Five of the most common materials including gold (Au), silver/silver chloride (Ag/AgCl), platinum (Pt), Iridium oxide (IrOx), and platinum-iridium oxide (Pt/IrOx) were investigated for electrode diameters of 300 μm. The critical characteristics such as polarization impedance, AC current-induced polarization, long-term stability and low-frequency noise were studied in vitro (0.9% saline). The two most promising materials, Pt and Pt/lrOx were further investigated in vivo by recording waves of spreading depolarization, one of the most important applications for DC-ECoG in clinical and basic science research. Main results. Our experimental results indicate that IrOx-based microelectrodes, particularly with composite layers of nanostructures, are excellent in all of the common evaluation characteristics both in vitro and in vivo and are most suitable for multimodal monitoring applications. Pt electrodes suffer high current-induced polarization, but have acceptable long-term stability suitable for DC-ECoG. Major significance. The results of this study provide quantitative data on the electrical properties of microelectrodes with commonly-used materials and will be valuable for development of neural recordings inclusive of

  3. Superconducting polarizing magnet for a movable polarized target

    International Nuclear Information System (INIS)

    Anishchenko, N.G.; Bartenev, V.D.; Blinov, N.A.

    1998-01-01

    The superconducting polarizing magnet was constructed for the JINR (Dubna) movable polarized target (MPT) with working volume 200 mm long and 30 mm in diameter. The magnet provides a polarizing magnetic field up to 6 T in the centre with the uniformity of 4.5 x 10 -4 in the working volume of the target. The magnet contains a main solenoidal winding 558 mm long and 206/144 mm in diameters, and compensating and correcting winding placed at its ends. The windings are made of a NbTi wire, impregnated with the epoxy resin and placed in the horizontal cryostat. The diameter of the 'warm' aperture of the magnet cryostat is 96 mm. The design and technology of the magnet winding are described. Results of the magnetic field map measurements, using a NMR-magnetometer are given. A similar magnet constructed at DAPNIA, CEA/Saclay (France), represented a model for the present development. The MPT array is installed in the beam line of polarized neutrons produced by break-up of polarized deuterons extracted from the synchrophasotron of the Laboratory of High Energies (LHE), JINR (Dubna)

  4. Hydrodynamics of a freely movable flexible fin near the ground

    Science.gov (United States)

    Jeong, Young Dal; Lee, Jae Hwa

    2017-11-01

    In the present study, a freely movable flexible fin is numerically modelled to investigate the flapping dynamics of the fin near the ground in a Poiseuille flow. A leading edge of the fin is fixed in the streamwise direction, whereas the lateral motion is spontaneously determined by hydrodynamic interaction between the fin and surrounding fluid. When the fin is initially positioned at yo, the fin passively migrates toward another wall-normal position for an equilibrium state by the interaction between passively flapping flexible body and ground. At the equilibrium position, the drag coefficient of the fin (CD) significantly decreases due to decaying of the flapping and low flow velocity and the fin can swim consistently without the time-averaged lateral force. Two distinctive behavior at the transient state (flapping and non-flapping migration modes) and three distinctive behaviors at the equilibrium state (deflected-straight, large- and small-amplitude flapping modes) are observed depending on the bending rigidity (γ) and mass ratio (μ) of the fin. The equilibrium position of the fin is investigated as a function of initial position (yo) , bending rigidity (γ) , mass ratio (μ) and the Reynolds number (Re). This research was supported by the National Research Foundation of Korea (NRF) funded by the Ministry of Education (NRF-2017R1D1A1A09000537) and the Ministry of Science, ICT & Future Planning (NRF-2017R1A5A1015311).

  5. Parylene for MEMS applications

    Science.gov (United States)

    Yao, Tze-Jung

    The goal of this thesis is to utilize Parylene, a room-temperature chemical-vapor-deposited (CVD) polymer, for MicroElectroMechanical Systems (MEMS) applications. The identified unique properties of Parylene are used to fabricate various micromachining devices such as thermopneumatic microvalve, in-channel microflow restrictor, and electret microphones. First, the properties of Parylene as a MEMS material are reviewed. The electrical, thermal, surface, and mechanical properties are first compared with that of other materials and further studied specifically for MEMS applications. The high dielectric strength (determined as 250V/mum) of Parylene makes it suitable for use as an electrical insulation material. However, its high resistivity causes un-desired charging effects first described in polymer-based electrostatic devices. The undesired high pull-in voltage, "bounce-back," and "snap-down" effects caused by dielectric charging are studied. Second, to make Parylene as a surface-micromachined material, a process that overcomes the stiction problem has to be developed. Thus, a new technique that combines wet-acetone dissolution and dry BrF3 dry etching has developed to overcome the stiction problem, which prevents Parylene microstructures from freestanding. The devices of mm*mm size with high yield are demonstrated using this technology. A thermopneumatic microvalve with a corrugated silicone/Parylene composite membrane is designed, fabricated, and tested for gas flows of several slpm and inlet pressures of tens of psi. The lowest power consumption to turn off the gas flow is determined to be 73mW. A silicone-based microfluidic coupler, initially designed for microvalve packaging, is also demonstrated for its ability to connect the external macrofluidic world to microfluidic devices. The demonstrated "quick-connect" microfluidic coupler has low leakage, is reusable, and can maintain good seal up to 60 psi. An in-channel microflow restrictor is also demonstrated with

  6. Ovenized microelectromechanical system (MEMS) resonator

    Science.gov (United States)

    Olsson, Roy H; Wojciechowski, Kenneth; Kim, Bongsang

    2014-03-11

    An ovenized micro-electro-mechanical system (MEMS) resonator including: a substantially thermally isolated mechanical resonator cavity; a mechanical oscillator coupled to the mechanical resonator cavity; and a heating element formed on the mechanical resonator cavity.

  7. Optically transduced MEMS magnetometer

    Science.gov (United States)

    Nielson, Gregory N; Langlois, Eric

    2014-03-18

    MEMS magnetometers with optically transduced resonator displacement are described herein. Improved sensitivity, crosstalk reduction, and extended dynamic range may be achieved with devices including a deflectable resonator suspended from the support, a first grating extending from the support and disposed over the resonator, a pair of drive electrodes to drive an alternating current through the resonator, and a second grating in the resonator overlapping the first grating to form a multi-layer grating having apertures that vary dimensionally in response to deflection occurring as the resonator mechanically resonates in a plane parallel to the first grating in the presence of a magnetic field as a function of the Lorentz force resulting from the alternating current. A plurality of such multi-layer gratings may be disposed across a length of the resonator to provide greater dynamic range and/or accommodate fabrication tolerances.

  8. MEMS digital parametric loudspeaker

    KAUST Repository

    Carreno, Armando Arpys Arevalo

    2016-03-23

    This paper reports on the design and fabrication of MEMS actuator arrays suitable for Digital Sound reconstruction and Parametric Directional Loudspeakers. Two distinct versions of the device were fabricated: one using the electrostatic principle actuation and the other one, the piezoelectric principle. Both versions used similar membrane dimensions, with a diameter of 500 μm. These devices are the smallest Micro-Machined Ultrasound Transducer (MUT) arrays that can be operated for both modes: Digital Sound Reconstruction and Parametric Loudspeaker. The chips consist of an array with 256 transducers, in a footprint of 12 mm by 12 mm. The total single chip size is: 2.3 cm by 2.3 cm, including the contact pads. © 2016 IEEE.

  9. Effects of Radiation on MEMS

    OpenAIRE

    Shea, Herbert

    2011-01-01

    The sensitivity of MEMS devices to radiation is reviewed, with an emphasis on radiation levels representative of space missions. While silicon and metals generally do not show mechanical degradation at the radiation levels encountered in most missions, MEMS devices have been reported to fail at doses of as few krad, corresponding to less than one year in most orbits. Radiation sensitivity is linked primarily to the impact on device operation of radiation-induced trapped charge in dielectrics...

  10. Characterization of MEMS FTIR spectrometer

    Science.gov (United States)

    Khalil, Diaa; Sabry, Yasser; Omran, Haitham; Medhat, Mostafa; Hafez, Amr; Saadany, Bassam

    2011-03-01

    In this work we present the full characterization of an optical MEMS Fourier Transform Infra Red FTIR spectrometer fabricated by Deep Reactive Ion Etching DRIE Technology on Silicon substrate. Both electrical and optical properties of the spectrometer are measured. The presented techniques allows to build an engineering model for the spectrometer and to predict its main specifications taking into account the specificity of the MEMS technology used in the spectrometer fabrication.

  11. MEMS for automotive and aerospace applications

    CERN Document Server

    Kraft, Michael

    2013-01-01

    MEMS for automotive and aerospace applications reviews the use of Micro-Electro-Mechanical-Systems (MEMS) in developing solutions to the unique challenges presented by the automotive and aerospace industries.Part one explores MEMS for a variety of automotive applications. The role of MEMS in passenger safety and comfort, sensors for automotive vehicle stability control applications and automotive tire pressure monitoring systems are considered, along with pressure and flow sensors for engine management, and RF MEMS for automotive radar sensors. Part two then goes on to explore MEMS for

  12. Stretchable microelectrode array using room-temperature liquid alloy interconnects

    International Nuclear Information System (INIS)

    Wei, P; Ziaie, B; Taylor, R; Chung, C; Higgs, G; Pruitt, B L; Ding, Z; Abilez, O J

    2011-01-01

    In this paper, we present a stretchable microelectrode array for studying cell behavior under mechanical strain. The electrode array consists of gold-plated nail-head pins (250 µm tip diameter) or tungsten micro-wires (25.4 µm in diameter) inserted into a polydimethylsiloxane (PDMS) platform (25.4 × 25.4 mm 2 ). Stretchable interconnects to the outside were provided by fusible indium-alloy-filled microchannels. The alloy is liquid at room temperature, thus providing the necessary stretchability and electrical conductivity. The electrode platform can withstand strains of up to 40% and repeated (100 times) strains of up to 35% did not cause any failure in the electrodes or the PDMS substrate. We confirmed biocompatibility of short-term culture, and using the gold pin device, we demonstrated electric field pacing of adult murine heart cells. Further, using the tungsten microelectrode device, we successfully measured depolarizations of differentiated murine heart cells from embryoid body clusters

  13. Electrochemical measurements on a droplet using gold microelectrodes

    International Nuclear Information System (INIS)

    Jenabi, Amin; Souri, Asma; Rastkhadiv, Ali

    2016-01-01

    Facile methods of ion recognition are important for the fabrication of electronic tongue systems. In this work, we demonstrate performing pulsed conductometry on microliter electrolyte droplets dropped on gold microelectrodes vapor deposited on soda lime glass slides. A droplet is dropped between two microelectrodes when a voltage waveform from a preprogramed power supply is applied on them. The temporal variation of the electric current passing through the droplet is recorded, digitized and stored. The obtained data are compared with the database formed out of the previous experiences for the classification of the sample electrolytes. It is shown that the shape of the voltage waveform is the important parameter of the process. We devised a method for the optimization of the voltage waveform profile for obtaining the maximum of discriminating information from the recorded current variations. (paper)

  14. Comparison of microelectrode sensing configurations for impedimetric cell monitoring

    DEFF Research Database (Denmark)

    Caviglia, Claudia; Heiskanen, Arto; Andresen, Thomas Lars

    2012-01-01

    interdigitated microelectrodes using a versatile custom-made monitoring platform including a 24-channel miniaturized potentiostat. As expected, characterization of bare microelectrodes in buffer and tracking experiments with HeLa cells over 16 hours demonstrate that the coplanar configuration provides a higher......A theoretical and experimental comparison between vertical and coplanar interdigitated sensing configurations for impedimetric cell growth tracking is presented. For the first time, these widely-adopted approaches are quantitatively compared on the same cell populations and on the same 10μm...... sensitivity to cell adhesion and spreading (Cell Index = 1.6 vs. 0.4) albeit at a higher frequency of maximum sensitivity (100kHz vs. 24 kHz)....

  15. Carbon composite microelectrodes: charge percolation and electroanalytical performance.

    Science.gov (United States)

    Ramírez-García, Sonia; Alegret, Salvador; Céspedes, Francisco; Forster, Robert J

    2004-02-01

    Microelectrodes based on two different epoxy-graphite composites (Araldite-M/HY5162 and Araldite-PY302-2/HY943) that are compatible with organic solvents have been developed and characterized. The variation in the bulk conductivity with graphite particle loading is described by percolation theory and indicates that the particles interact strongly with one another. The percolation threshold is 52% v/v loading of graphite, and this composite exhibits a bulk conductivity of 15 S m(-1). Microdisk electrodes of 25-microm diameter were produced by first etching a microcavity at the tip of a platinum microelectrode, which was then packed with a composite containing 60% v/v graphite so as to optimize both electrical conductivity and the electrode stability in acetonitrile and methanol solutions. Solution phase voltammetry of ferrocene is nearly ideal, and the responses are dominated by radial diffusion (slow scan rates) and semi-infinite linear diffusion (fast scan rates). The microelectrodes display high signal-to-noise ratios, good sensitivity, and low detection limits. The response times given by the product of the resistance, R, and capacitance, C, are 7.5 x 10(-4) and 1.4 x 10(-1) s for the Araldite M and PY302-2 composites, respectively. Although these response times are significantly slower than those associated with microelectrodes based on carbon fibers or metal wires, they are sufficient for time-resolved electroanalytical applications. The long response times arise from the large composite resistances, 3.1 x 10(11) and 8.3 x 10(11) Omega cm(-2) for Araldite M and PY302-2, respectively. Voltammetry of ferrocene in the absence of deliberately added supporting electrolyte is also reported. Significantly, indistinguishable slopes and intercepts for a calibration curve of peak current vs ferrocene concentration where 2 < [ferrocene] < 50 microM are obtained in the presence and absence of supporting electrolyte.

  16. Piezoelectric MEMS: Ferroelectric thin films for MEMS applications

    Science.gov (United States)

    Kanno, Isaku

    2018-04-01

    In recent years, piezoelectric microelectromechanical systems (MEMS) have attracted attention as next-generation functional microdevices. Typical applications of piezoelectric MEMS are micropumps for inkjet heads or micro-gyrosensors, which are composed of piezoelectric Pb(Zr,Ti)O3 (PZT) thin films and have already been commercialized. In addition, piezoelectric vibration energy harvesters (PVEHs), which are regarded as one of the key devices for Internet of Things (IoT)-related technologies, are promising future applications of piezoelectric MEMS. Significant features of piezoelectric MEMS are their simple structure and high energy conversion efficiency between mechanical and electrical domains even on the microscale. The device performance strongly depends on the function of the piezoelectric thin films, especially on their transverse piezoelectric properties, indicating that the deposition of high-quality piezoelectric thin films is a crucial technology for piezoelectric MEMS. On the other hand, although the difficulty in measuring the precise piezoelectric coefficients of thin films is a serious obstacle in the research and development of piezoelectric thin films, a simple unimorph cantilever measurement method has been proposed to obtain precise values of the direct or converse transverse piezoelectric coefficient of thin films, and recently this method has become to be the standardized testing method. In this article, I will introduce fundamental technologies of piezoelectric thin films and related microdevices, especially focusing on the deposition of PZT thin films and evaluation methods for their transverse piezoelectric properties.

  17. Carbon Nanotube-based microelectrodes for enhanced detection of neurotransmitters

    Science.gov (United States)

    Jacobs, Christopher B.

    Fast-scan cyclic voltammetry (FSCV) is one of the common techniques used for rapid measurement of neurotransmitters in vivo. Carbon-fiber microelectrodes (CFMEs) are typically used for neurotransmitter detection because of sub-second measurement capabilities, ability to measure changes in neurotransmitter concentration during neurotransmission, and the small size electrode diameter, which limits the amount of damage caused to tissue. Cylinder CFMEs, typically 50 -- 100 microm long, are commonly used for in vivo experiments because the electrode sensitivity is directly related to the electrode surface area. However the length of the electrode can limit the spatial resolution of neurotransmitter detection, which can restrict experiments in Drosophila and other small model systems. In addition, the electrode sensitivity toward dopamine and serotonin detection drops significantly for measurements at rates faster than 10 Hz, limiting the temporal resolution of CFMEs. While the use of FSCV at carbon-fiber microelectrodes has led to substantial strides in our understanding of neurotransmission, techniques that expand the capabilities of CFMEs are crucial to fully maximize the potential uses of FSCV. This dissertation introduces new methods to integrate carbon nanotubes (CNT) into microelectrodes and discusses the electrochemical enhancements of these CNT-microelectrodes. The electrodes are specifically designed with simple fabrication procedures so that highly specialized equipment is not necessary, and they utilize commercially available materials so that the electrodes could be easily integrated into existing systems. The electrochemical properties of CNT modified CFMEs are characterized using FSCV and the effect of CNT functionalization on these properties is explored in Chapter 2. For example, CFME modification using carboxylic acid functionalized CNTs yield about a 6-fold increase in dopamine oxidation current, but modification with octadecylamine CNTs results in a

  18. CMOS MEMS Fabrication Technologies and Devices

    Directory of Open Access Journals (Sweden)

    Hongwei Qu

    2016-01-01

    Full Text Available This paper reviews CMOS (complementary metal-oxide-semiconductor MEMS (micro-electro-mechanical systems fabrication technologies and enabled micro devices of various sensors and actuators. The technologies are classified based on the sequence of the fabrication of CMOS circuitry and MEMS elements, while SOI (silicon-on-insulator CMOS MEMS are introduced separately. Introduction of associated devices follows the description of the respective CMOS MEMS technologies. Due to the vast array of CMOS MEMS devices, this review focuses only on the most typical MEMS sensors and actuators including pressure sensors, inertial sensors, frequency reference devices and actuators utilizing different physics effects and the fabrication processes introduced. Moreover, the incorporation of MEMS and CMOS is limited to monolithic integration, meaning wafer-bonding-based stacking and other integration approaches, despite their advantages, are excluded from the discussion. Both competitive industrial products and state-of-the-art research results on CMOS MEMS are covered.

  19. Conceptual MEMS Devices for a Redeployable Antenna

    National Research Council Canada - National Science Library

    Miller, Virginia

    2007-01-01

    Micro-Electro-Mechanical Systems (MEMS) are becoming an integral part of our lives through a wide range of applications, including MEMS accelerators for air bag deployment in vehicles, micromirrors in projection devices, and various...

  20. Microelectromechanical (MEM) thermal actuator

    Science.gov (United States)

    Garcia, Ernest J [Albuquerque, NM; Fulcher, Clay W. G. [Sandia Park, NM

    2012-07-31

    Microelectromechanical (MEM) buckling beam thermal actuators are disclosed wherein the buckling direction of a beam is constrained to a desired direction of actuation, which can be in-plane or out-of-plane with respect to a support substrate. The actuators comprise as-fabricated, linear beams of uniform cross section supported above the substrate by supports which rigidly attach a beam to the substrate. The beams can be heated by methods including the passage of an electrical current through them. The buckling direction of an initially straight beam upon heating and expansion is controlled by incorporating one or more directional constraints attached to the substrate and proximal to the mid-point of the beam. In the event that the beam initially buckles in an undesired direction, deformation of the beam induced by contact with a directional constraint generates an opposing force to re-direct the buckling beam into the desired direction. The displacement and force generated by the movement of the buckling beam can be harnessed to perform useful work, such as closing contacts in an electrical switch.

  1. Modeling nonlinearities in MEMS oscillators.

    Science.gov (United States)

    Agrawal, Deepak K; Woodhouse, Jim; Seshia, Ashwin A

    2013-08-01

    We present a mathematical model of a microelectromechanical system (MEMS) oscillator that integrates the nonlinearities of the MEMS resonator and the oscillator circuitry in a single numerical modeling environment. This is achieved by transforming the conventional nonlinear mechanical model into the electrical domain while simultaneously considering the prominent nonlinearities of the resonator. The proposed nonlinear electrical model is validated by comparing the simulated amplitude-frequency response with measurements on an open-loop electrically addressed flexural silicon MEMS resonator driven to large motional amplitudes. Next, the essential nonlinearities in the oscillator circuit are investigated and a mathematical model of a MEMS oscillator is proposed that integrates the nonlinearities of the resonator. The concept is illustrated for MEMS transimpedance-amplifier- based square-wave and sine-wave oscillators. Closed-form expressions of steady-state output power and output frequency are derived for both oscillator models and compared with experimental and simulation results, with a good match in the predicted trends in all three cases.

  2. Structured synthesis of MEMS using evolutionary approaches

    DEFF Research Database (Denmark)

    Fan, Zhun; Wang, Jiachuan; Achiche, Sofiane

    2008-01-01

    In this paper, we discuss the hierarchy that is involved in a typical MEMS design and how evolutionary approaches can be used to automate the hierarchical synthesis process for MEMS. The paper first introduces the flow of a structured MEMS design process and emphasizes that system-level lumped...... the integrated design automation idea using these evolutionary approaches....

  3. Electrostatic MEMS devices with high reliability

    Science.gov (United States)

    Goldsmith, Charles L; Auciello, Orlando H; Sumant, Anirudha V; Mancini, Derrick C; Gudeman, Chris; Sampath, Suresh; Carlilse, John A; Carpick, Robert W; Hwang, James

    2015-02-24

    The present invention provides for an electrostatic microelectromechanical (MEMS) device comprising a dielectric layer separating a first conductor and a second conductor. The first conductor is moveable towards the second conductor, when a voltage is applied to the MEMS device. The dielectric layer recovers from dielectric charging failure almost immediately upon removal of the voltage from the MEMS device.

  4. A six degrees of freedom mems manipulator

    NARCIS (Netherlands)

    de Jong, B.R.

    2006-01-01

    This thesis reports about a six degrees of freedom (DOF) precision manipulator in MEMS, concerning concept generation for the manipulator followed by design and fabrication (of parts) of the proposed manipulation concept in MEMS. Researching the abilities of 6 DOF precision manipulation in MEMS is

  5. Nanoporous gold microelectrode prepared from potential modulated electrochemical alloying–dealloying in ionic liquid

    International Nuclear Information System (INIS)

    Jiang, Junhua; Wang, Xinying; Zhang, Lei

    2013-01-01

    Highlights: • A green chemistry method for producing nanoporous gold microelectrode was studied. • An ionic liquid plating bath was utilized for electrochemical alloying–dealloying. • Nanostructures of gold surface layers can be tuned by modulating potential. • Nanoporous gold microelectrode has high surface area and merit of a microelectrode. • Nitrite oxidation and reduction on nanoporous gold microelectrode were studied. -- Abstract: Nanoporous gold (NPG) microelectrodes with high surface area and open pore network were successfully prepared by applying modulated potential to a polycrystalline Au-disk microelectrode in ionic liquid electrolyte containing ZnCl 2 at elevated temperature. During cathodic process, Zn is electrodeposited and interacted with Au microdisk substrate to form a AuZn alloy phase. During subsequent anodic process, Zn is selectively dissolved from the alloy phase, leading to the formation of a NPG layer which can grow with repetitive potential modulation. Scanning-electron microscope and energy dispersive X-ray microscope measurements show that the NPG microelectrodes possessing nanoporous structures can be tuned via potential modulation, and chemically contain a small amount of Zn whose presence has no obvious influence on electrochemical responses of the electrodes. Steady-state and cyclic voltammetric studies suggest that the NPG microelectrodes have high surface area and keep diffusional properties of a microelectrode. Electrochemical nitrite reduction and oxidation are studied as model reactions to demonstrate potential applications of the NPG microelectrodes in electrocatalysis and electroanalysis. These facts suggest that the potential-modulated electrochemical alloying/dealloying in ionic liquid electrolyte offers a convenient green-chemistry method for the preparation of nanoporous microelectrodes

  6. MEMS linear and nonlinear statics and dynamics

    CERN Document Server

    Younis, Mohammad I

    2011-01-01

    MEMS Linear and Nonlinear Statics and Dynamics presents the necessary analytical and computational tools for MEMS designers to model and simulate most known MEMS devices, structures, and phenomena. This book also provides an in-depth analysis and treatment of the most common static and dynamic phenomena in MEMS that are encountered by engineers. Coverage also includes nonlinear modeling approaches to modeling various MEMS phenomena of a nonlinear nature, such as those due to electrostatic forces, squeeze-film damping, and large deflection of structures. The book also: Includes examples of nume

  7. Of light, of MEMS: Optical MEMS in telecommunications and beyond

    Indian Academy of Sciences (India)

    Abstract. The burst of the Internet bubble in 2000 has severely quenched the pace of development in the optical MEMS field. However, it is now clear that this field is again set to move forward as not only telecommunication but many other industries are benefiting from its application. We describe in this paper some of.

  8. Silicon Wafer-Based Platinum Microelectrode Array Biosensor for Near Real-Time Measurement of Glutamate in Vivo

    Directory of Open Access Journals (Sweden)

    Nigel T. Maidment

    2008-08-01

    Full Text Available Using Micro-Electro-Mechanical-Systems (MEMS technologies, we have developed silicon wafer-based platinum microelectrode arrays (MEAs modified with glutamate oxidase (GluOx for electroenzymatic detection of glutamate in vivo. These MEAs were designed to have optimal spatial resolution for in vivo recordings. Selective detection of glutamate in the presence of the electroactive interferents, dopamine and ascorbic acid, was attained by deposition of polypyrrole and Nafion. The sensors responded to glutamate with a limit of detection under 1μM and a sub-1-second response time in solution. In addition to extensive in vitro characterization, the utility of these MEA glutamate biosensors was also established in vivo. In the anesthetized rat, these MEA glutamate biosensors were used for detection of cortically-evoked glutamate release in the ventral striatum. The MEA biosensors also were applied to the detection of stress-induced glutamate release in the dorsal striatum of the freely-moving rat.

  9. Monitoring of cell cultures with LTCC microelectrode array.

    Science.gov (United States)

    Ciosek, P; Zawadzki, K; Łopacińska, J; Skolimowski, M; Bembnowicz, P; Golonka, L J; Brzózka, Z; Wróblewski, W

    2009-04-01

    Monitoring of cell cultures in microbioreactors is a crucial task in cell bioassays and toxicological tests. In this work a novel tool based on a miniaturized sensor array fabricated using low-temperature cofired ceramics (LTCC) technology is presented. The developed device is applied to the monitoring of cell-culture media change, detection of the growth of various species, and in toxicological studies performed with the use of cells. Noninvasive monitoring performed with the LTCC microelectrode array can be applied for future cell-engineering purposes.

  10. Combined Reactor and Microelectrode Measurements in Laboratory Grown Biofilms

    DEFF Research Database (Denmark)

    Larsen, Tove; Harremoës, Poul

    1994-01-01

    were carried out with aerobic glucose and starch degrading biofilms. The well described aerobic glucose degradation biofilm system was used to test the combined reactor set-up. Results predicted from known biofilm kinetics were obtained. In the starch degrading biofilm, basic assumptions were tested...... with the microelectrode measurements. It was established, that even with a high molecular weight, non-diffusible substrate, degradation took place in the depths of the biofilm. Intrinsic enzymatic hydrolysis was not limiting and the volumetric removal rate of oxygen was zero order....

  11. Intracellular microelectrode measurements in small cells evaluated with the patch clamp technique

    NARCIS (Netherlands)

    Ince, C.; van Bavel, E.; van Duijn, B.; Donkersloot, K.; Coremans, A.; Ypey, D. L.; Verveen, A. A.

    1986-01-01

    Microelectrode penetration of small cells leads to a sustained depolarization of the resting membrane potential due to a transmembrane shunt resistance (Rs) introduced by the microelectrode. This has led to underestimation of the resting membrane potential of various cell types. However, measurement

  12. Modeling of rf MEMS switches

    Science.gov (United States)

    Robertson, Barbara; Ho, Fat D.; Hudson, Tracy D.

    2001-10-01

    The microelectromechanical system (MEMS) switch offers many benefits in radio frequency (RF) applications. These benefits include low insertion loss, high quality factor (Q), low power, RF isolation, and low cost. The ability to manufacture mechanical switches on a chip with electronics can lead to higher functionality, such as single-chip arrays, and smart switches. The MEMS switch is also used as a building block in devices such as phase shifters, filters, and switchable antenna elements. The MEMS designer needs models of these basic elements in order to incorporate them into their applications. The objective of this effort is to develop lumped element models for MEMS RF switches, which are incorporated into a CAD software. Tanner Research Inc.'s Electronic Design Automation (EDA) software is being used to develop a suite of mixed-signal RF switch models. The suite will include switches made from cantilever beams and fixed-fixed beams. The switches may be actuated by electrostatic, piezoelectric or electromagnetic forces. The effort presented in this paper concentrates on switches actuated by electrostatic forces. The lumped element models use a current-force electrical-mechanical analogy. Finite element modeling and device testing will be used to verify the Tanner models. The effects of materials, geometries, temperature, fringing fields, and mounting geometries are considered.

  13. MEMS AO for Planet Finding

    Science.gov (United States)

    Rao, Shanti; Wallace, J. Kent; Shao, Mike; Schmidtlin, Edouard; Levine, B. Martin; Samuele, Rocco; Lane, Benjamin; Chakrabarti, Supriya; Cook, Timothy; Hicks, Brian; hide

    2008-01-01

    This slide presentation reviews a method for planet finding using microelectromechanical systems (MEMS) Adaptive Optics (AO). The use of a deformable mirror (DM) is described as a part of the instrument that was designed with a nulling interferometer. The strategy that is used is described in detail.

  14. Chronic intracortical neural recordings using microelectrode arrays coated with PEDOT-TFB.

    Science.gov (United States)

    Charkhkar, Hamid; Knaack, Gretchen L; McHail, Daniel G; Mandal, Himadri S; Peixoto, Nathalia; Rubinson, Judith F; Dumas, Theodore C; Pancrazio, Joseph J

    2016-03-01

    Microelectrode arrays have been extensively utilized to record extracellular neuronal activity for brain-machine interface applications. Modifying the microelectrodes with conductive polymers such as poly(3,4-ethylenedioxythiophene) (PEDOT) has been reported to be advantageous because it increases the effective surface area of the microelectrodes, thereby decreasing impedance and enhancing charge transfer capacity. However, the long term stability and integrity of such coatings for chronic recordings remains unclear. Previously, our group has demonstrated that use of the smaller counter ion tetrafluoroborate (TFB) during electrodeposition increased the stability of the PEDOT coatings in vitro compared to the commonly used counter ion poly(styrenesulfonate) (PSS). In the current work, we examined the long-term in vivo performance of PEDOT-TFB coated microelectrodes. To do so, we selectively modified half of the microelectrodes on NeuroNexus single shank probes with PEDOT-TFB while the other half of the microelectrodes were modified with gold as a control. The modified probes were then implanted into the primary motor cortex of rats. Single unit recordings were observed on both PEDOT-TFB and gold control microelectrodes for more than 12 weeks. Compared to the gold-coated microelectrodes, the PEDOT-TFB coated microelectrodes exhibited an overall significantly lower impedance and higher number of units per microelectrode specifically for the first four weeks. The majority of PEDOT-TFB microelectrodes with activity had an impedance magnitude lower than 400 kΩ at 1 kHz. Our equivalent circuit modeling of the impedance data suggests stability in the polymer-related parameters for the duration of the study. In addition, when comparing PEDOT-TFB microelectrodes with and without long-term activity, we observed a distinction in certain circuit parameters for these microelectrodes derived from equivalent circuit modeling prior to implantation. This observation may prove

  15. Comb structure analysis of the capacitive sensitive element in MEMS-accelerometer

    Science.gov (United States)

    Shalimov, Andrew; Timoshenkov, Sergey; Korobova, Natalia; Golovinskiy, Maxim; Timoshenkov, Alexey; Zuev, Egor; Berezueva, Svetlana; Kosolapov, Andrey

    2015-05-01

    In this paper analysis of comb design for the sensing element MEMS accelerometer with longitudinal displacement of the inertial mass under the influence of acceleration to obtain the necessary parameters for the further construction of an electronic circuit for removal and signal processing has been done. Fixed on the stator the inertia mass has the ability to move under the influence of acceleration along the longitudinal structure. As a result the distance between the fixed and movable combs, and hence the capacitance in the capacitors have been changed. Measuring the difference of these capacitances you can estimate the value of the applied acceleration. Furthermore, managing combs that should apply an electrostatic force for artificial deviation of the inertial mass may be used for the initial sensitive elements culling. Also in this case there is a change of capacitances, which can be measured by the comb and make a decision about the spoilage presence or absence.

  16. A new dynamic electrochemical transduction mechanism for interdigitated array microelectrodes.

    Science.gov (United States)

    Zhu, Xiaoshan; Choi, Jin-Woo; Ahn, Chong H

    2004-12-01

    A dynamic electrochemical transduction mechanism for interdigitated array microelectrodes using an electrical charge pumping method is presented in this paper. In this dynamic transduction mechanism, a charged external capacitor is used as the charge supplier for the electrochemical reaction of the reversible redox species at the interdigitated array electrodes. The charges stored in the capacitor are consumed as the electrochemical reaction current, which causes the capacitor potential decay. The theoretical analysis has shown that the species concentration has a decisive effect on the capacitor potential decay, and therefore the characteristics of the capacitor potential decay are recorded and analyzed to evaluate the concentration of redox species. The new transduction mechanism has the advantages of achieving high sensitivity with small sensor area and simplifying the measurement instrumentation. As a demonstration device, interdigitated array microelectrodes (approximately 0.2 mm(2) electrode surface area) have been fabricated and successfully characterized using p-aminophenol as the redox species under this dynamic mechanism. The detection limit of p-aminophenol was calculated to be approximately 4 x 10(-7) M for the sensor with the new dynamic transduction mechanism.

  17. Digital microfluidic operations on micro-electrode dot array architecture.

    Science.gov (United States)

    Wang, G; Teng, D; Fan, S-K

    2011-12-01

    As digital microfluidics-based biochips find more applications, their complexity is expected to increase significantly owing to the trend of multiple and concurrent assays on the chip. There is a pressing need to deliver a top-down design methodology that the biochip designer can leverage the same level of computer-aided design support as the semi-conductor industry now does. Moreover, as microelectronics fabrication technology is scaling up and integrated device performance is improving, it is expected that these microfluidic biochips will be integrated with microelectronic components in next-generation system-on-chip designs. This study presents the analysis and experiments of digital microfluidic operations on a novel electrowetting-on-dielectric-based 'micro-electrode dot array architecture' that fosters a development path for hierarchical top-down design approach for digital microfluidics. The proposed architecture allows dynamic configurations and activations of identical basic microfluidic unit called 'micro-electrode cells' to design microfluidic components, layouts, routing, microfluidic operations and applications of the biochip hierarchically. Fundamental microfluidic operations have been successfully performed by the architecture. In addition, this novel architecture demonstrates a number of advantages and flexibilities over the conventional digital microfluidics in performing advanced microfluidic operations.

  18. A Single Platinum Microelectrode for Identifying Soft Drink Samples

    Directory of Open Access Journals (Sweden)

    Lígia Bueno

    2012-01-01

    Full Text Available Cyclic voltammograms recorded with a single platinum microelectrode were used along with a non-supervised pattern recognition, namely, Principal Component Analysis, to conduct a qualitative analysis of sixteen different brands of carbonated soft drinks (Kuat, Soda Antarctica, H2OH!, Sprite 2.0, Guarana Antarctica, Guarana Antarctica Zero, Coca-Cola, Coca-Cola Zero, Coca-Cola Plus, Pepsi, Pepsi Light, Pepsi Twist, Pepsi Twist Light, Pepsi Twist 3, Schin Cola, and Classic Dillar’s. In this analysis, soft drink samples were not subjected to pre-treatment. Good differentiation among all the analysed soft drinks was achieved using the voltammetric data. An analysis of the loading plots shows that the potentials of −0.65 V, −0.4 V, 0.4 V, and 0.750 V facilitated the discrimination process. The electrochemical processes related to this potential are the reduction of hydrogen ions and inhibition of the platinum oxidation by the caffeine adsorption on the electrode surface. Additionally, the single platinum microelectrode was useful for the quality control of the soft drink samples, as it helped to identify the time at which the beverage was opened.

  19. Nanostructured gold microelectrodes for extracellular recording from electrogenic cells

    Energy Technology Data Exchange (ETDEWEB)

    Brueggemann, D; Wolfrum, B; Maybeck, V; Mourzina, Y; Jansen, M; Offenhaeusser, A, E-mail: a.offenhaeusser@fz-juelich.de [Institute of Complex Systems and Peter Gruenberg Institute: Bioelectronics (ICS8/PGI8), Forschungszentrum Juelich GmbH, Leo-Brandt-Strasse, 52428 Juelich (Germany); Juelich-Aachen Research Alliance-Fundamental of Future Information Technology (JARA-FIT) (Germany)

    2011-07-01

    We present a new biocompatible nanostructured microelectrode array for extracellular signal recording from electrogenic cells. Microfabrication techniques were combined with a template-assisted approach using nanoporous aluminum oxide to develop gold nanopillar electrodes. The nanopillars were approximately 300-400 nm high and had a diameter of 60 nm. Thus, they yielded a higher surface area of the electrodes resulting in a decreased impedance compared to planar electrodes. The interaction between the large-scale gold nanopillar arrays and cardiac muscle cells (HL-1) was investigated via focused ion beam milling. In the resulting cross-sections we observed a tight coupling between the HL-1 cells and the gold nanostructures. However, the cell membranes did not bend into the cleft between adjacent nanopillars due to the high pillar density. We performed extracellular potential recordings from HL-1 cells with the nanostructured microelectrode arrays. The maximal amplitudes recorded with the nanopillar electrodes were up to 100% higher than those recorded with planar gold electrodes. Increasing the aspect ratio of the gold nanopillars and changing the geometrical layout can further enhance the signal quality in the future.

  20. Spatial variability of the wave bottom boundary layer over movable rippled beds

    NARCIS (Netherlands)

    Rodriguez-Abudo, S.; Foster, D.L.; Henriquez, M.

    2013-01-01

    Observations of the spatially dependent velocity field over movable bed forms subjected to slightly skewed and asymmetric regular wave forcing were collected. The dynamics between the ripple elements is dominated by coherent vortices, characterized by the swirling strength, and evidenced in the

  1. TRAJECTORY CONTROL OF A SOLID BODY RELATIVE TO THE MOVABLE OBJECT

    Directory of Open Access Journals (Sweden)

    Y. A. Kapitanyuk

    2014-03-01

    Full Text Available The paper deals with the problem of dynamic tracking of an external movable object. These problems arise when designing tracking control systems for unmanned aircrafts following ground movable objects. A dynamic model of a solid body in three-dimensional space is selected as a control object model. An external object is described by the kinematic model of a solid body on the plane. Smooth trajectory is defined as an implicit curve associated with an external movable object. The desired height of movement is selected separately. Relative dynamics of the plant and an external movable object is considered for the synthesis of control algorithm, and methods of differential geometric transformation of the original model to the task-oriented coordinate system are applied. The original problem is formulated in terms of a longitudinal motion and two orthogonal deviations after transformation. The main results are represented by task-oriented model of spatial movement and the corresponding nonlinear control algorithms. An example of solid body motion along a circular trajectory with respect to a given rectilinear motion of an external object is given for the illustration of the proposed method performance.

  2. Movable Heritage in Libraries: An Introduction to Heritage and What It Means for Managing Library Collections

    Science.gov (United States)

    Quinlisk, Meg

    2009-01-01

    The cultural heritage of library collections and individual items is of importance and interest outside the profession of librarianship. This paper gives an introduction to the concept of "movable heritage" from the heritage professional's perspective and provides suggestions as to how this concept can be applied to libraries.…

  3. Analysis of Heat Stress and the Indoor Climate Control Requirements for Movable Refuge Chambers.

    Science.gov (United States)

    Hao, Xiaoli; Guo, Chenxin; Lin, Yaolin; Wang, Haiqiao; Liu, Heqing

    2016-05-20

    Movable refuge chambers are a new kind of rescue device for underground mining, which is believed to have a potential positive impact on reducing the rate of fatalities. It is likely to be hot and humid inside a movable refuge chamber due to the metabolism of trapped miners, heat generated by equipment and heat transferred from outside. To investigate the heat stress experienced by miners trapped in a movable refuge chamber, the predicted heat strain (PHS) model was used to simulate the heat transfer process between the person and the thermal environment. The variations of heat stress with the temperature and humidity inside the refuge chamber were analyzed. The effects of air temperature outside the refuge chamber and the overall heat transfer coefficient of the refuge chamber shell on the heat stress inside the refuge chamber was also investigated. The relationship between the limit of exposure duration and the air temperature and humidity was numerically analyzed to determine the upper limits of temperature and humidity inside a refuge chamber. Air temperature of 32 °C and relative humidity of 70% are recommended as the design standard for internal thermal environment control of movable refuge chambers.

  4. Design of software about turn pattern measurement for the movable radial detector on HIRFL

    International Nuclear Information System (INIS)

    Xu Xiangyang; Song Haihong; Nie Zhenpeng; Tang Jingyu

    2000-01-01

    Object Oriented Programming (OOP) technique is adopted to develop the software in Windows environment of the movable radial probes and turn pattern measurement in SFC and SSC cyclotrons. Many functions such as data acquisition and storage, figure displaying and printing, detector movement are realized in the software to get higher operation efficiency in HIRFL and make the device work more steady

  5. Synthesis of hollow asymmetrical silica dumbbells with a movable inner core

    NARCIS (Netherlands)

    Nagao, D.; van Kats, C.M.; Hayasaka, K.; Sugimoto, M.; Konno, M.; Imhof, A.; van Blaaderen, A.

    2010-01-01

    Hollow asymmetrical silica dumbbells containing a movable inner core were fabricated by a template-assisted method. Three different templates were employed for the fabrication of the hollow asymmetrical dumbbells. For the preparation of the first template, silica particles were uniformly covered

  6. Design and Research of the Movable Hybrid Photovoltaic-Thermal (PVT System

    Directory of Open Access Journals (Sweden)

    Lian Zhang

    2017-04-01

    Full Text Available In recent years, with the development of photovoltaic system and photo-thermal system technology, hybrid photovoltaic-thermal (PVT technology has been a breakthrough in many aspects. This paper describes the movable hybrid PVT system from the aspects of appearance structure, energy flow, and control circuit. The system is equipped with rolling wheels and the simulated light sources also can be removed so that the system can be used in the outdoor conditions. The movable system is also suitable for the PVT system and its related applications without any external power supply. This system combines two technologies: photovoltaic power generation and photo-thermal utilization. The first part of the power supply is for the systems own output power supply, and the second part is for generating thermal energy. The two separate parts can be controlled and monitored respectively through the control circuits and the touch screens. The experimental results show that the system can generate 691 kWh electric energy and 3047.8 kWh thermal energy each year under normal working conditions. The efficiency of the proposed movable hybrid PVT system is calculated to be approximately 42.82% using the revised equations that are proposed in this paper. Therefore, the movable hybrid PVT system can meet the daily demands of hot water and electricity power in remote areas or islands and other non-grid areas. It also can be used to conduct experiment tests for the PVT system.

  7. Quantum theory of shuttling instability in a movable quantum dot array

    DEFF Research Database (Denmark)

    Donarini, Andrea; Novotny, Tomas; Jauho, Antti-Pekka

    2004-01-01

    We study the shuttling instability in an array of three quantum dots the central one of which is movable. We extend the results by Armour and MacKinnon on this problem to a broader parameter regime. The results obtained by an efficient numerical method are interpreted directly using the Wigner...

  8. Computer-Aided Design (CAD) for Integrated Microelectromechanical (MEMS) Devices

    National Research Council Canada - National Science Library

    Judy, Michael

    2002-01-01

    The objective of this "CAD for Integrated MEMS Devices" research project was to develop MEMS CAD design and development tools that would facilitate the creation of behavioral models for complex MEMS devices...

  9. Integration of a MEMS Inertial Measuring Unit with a MEMS Magnetometer for 3D Orientation Estimation

    DEFF Research Database (Denmark)

    Cai, Junping; Malureanu, Christian; Andersen, Niels Lervad

    2011-01-01

    This paper presents an algorithm for combining the measurements of a MEMS Inertial Measurement Unit (IMU) and a MEMS magnetometer. The measurements are done using a special designed and customized miniature detecting system for 3D orientation estimation, and position tracking......This paper presents an algorithm for combining the measurements of a MEMS Inertial Measurement Unit (IMU) and a MEMS magnetometer. The measurements are done using a special designed and customized miniature detecting system for 3D orientation estimation, and position tracking...

  10. Development of a three-dimensionally movable phantom system for dosimetric verifications

    International Nuclear Information System (INIS)

    Nakayama, Hiroshi; Mizowaki, Takashi; Narita, Yuichiro; Kawada, Noriyuki; Takahashi, Kunio; Mihara, Kazumasa; Hiraoka, Masahiro

    2008-01-01

    The authors developed a three-dimensionally movable phantom system (3D movable phantom system) which can reproduce three-dimensional movements to experimentally verify the impact of radiotherapy treatment-related movements on dose distribution. The phantom system consists of three integrated components: a three-dimensional driving mechanism (3D driving mechanism), computer control system, and phantoms for film dosimetry. The 3D driving mechanism is a quintessential part of this system. It is composed of three linear-motion tables (single-axis robots) which are joined orthogonally to each other. This mechanism has a motion range of 100 mm, with a maximum velocity of 200 mm/s in each dimension, and 3D motion ability of arbitrary patterns. These attributes are sufficient to reproduce almost all organ movements. The positional accuracy of this 3D movable phantom system in a state of geostationary is less than 0.1 mm. The maximum error in terms of the absolute position on movement was 0.56 mm. The positional reappearance error on movement was up to 0.23 mm. The observed fluctuation of time was 0.012 s in the cycle of 4.5 s of oscillation. These results suggested that the 3D movable phantom system exhibited a sufficient level of accuracy in terms of geometry and timing to reproduce interfractional organ movement or setup errors in order to assess the influence of these errors on high-precision radiotherapy such as stereotactic irradiation and intensity-modulated radiotherapy. In addition, the authors 3D movable phantom system will also be useful in evaluating the adequacy and efficacy of new treatment techniques such as gating or tracking radiotherapy

  11. Methods in laboratory investigation. Identification and evaluation of histopathology at microelectrode puncture sites.

    Science.gov (United States)

    Cole, M A; Bernick, S; Puffer, H W; Warner, N E; Crawford, D W

    1983-11-01

    Tissue puncture techniques using microelectrodes for various measurements have been criticized for producing undetermined degrees of tissue damage. Therefore, a method permitting routine identification of puncture tracks was developed to determine local microelectrode-induced injury. Rabbits were anesthetized and the femoral arteries surgically exposed. A 3-ml mixture of saline-India ink suspension was introduced through an ear vein. Oxygen-sensitive (pO2) microcathodes were advanced into and through the arterial wall at 10- or 20-micron intervals using a stepping microdrive to 150 to 450 micron and then withdrawn. The arteries were fixed in 10% formalin and gelatin embedded, and serial frozen sections (less than or equal to 15 micron) of the microelectrode puncture area were made. We observed within 5 minutes of microcathode withdrawal a dark, punctate, microscopic discoloration within the arterial wall. Histologically, ink distribution within the arterial wall demonstrated an acute permeability change: puncture depths generally less than 300 micron showed ink-lined microelectrode tracks (generally less than 2 micron wide) in the media, and greater puncture depths showed local hemorrhage and focal laminar accumulation of ink which extended from the track. The immediate adjacent area to microelectrode puncture depths less than 300 micron showed an apparent intact internal elastic lamina and media. Therefore, microelectrode damage has been shown to be primarily limited to microelectrode tissue tracks.

  12. Miniaturized GPS/MEMS IMU integrated board

    Science.gov (United States)

    Lin, Ching-Fang (Inventor)

    2012-01-01

    This invention documents the efforts on the research and development of a miniaturized GPS/MEMS IMU integrated navigation system. A miniaturized GPS/MEMS IMU integrated navigation system is presented; Laser Dynamic Range Imager (LDRI) based alignment algorithm for space applications is discussed. Two navigation cameras are also included to measure the range and range rate which can be integrated into the GPS/MEMS IMU system to enhance the navigation solution.

  13. Wafer level packaging of MEMS

    International Nuclear Information System (INIS)

    Esashi, Masayoshi

    2008-01-01

    Wafer level packaging plays many important roles for MEMS (micro electro mechanical systems), including cost, yield and reliability. MEMS structures on silicon chips are encapsulated between bonded wafers or by surface micromachining, and electrical interconnections are made from the cavity. Bonding at the interface, such as glass–Si anodic bonding and metal-to-metal bonding, requires electrical interconnection through the lid vias in many cases. On the other hand, lateral electrical interconnections on the surface of the chip are used for bonding with intermediate melting materials, such as low melting point glass and solder. The cavity formed by surface micromachining is made using sacrificial etching, and the openings needed for the sacrificial etching are plugged using deposition sealing methods. Vacuum packaging methods and the structures for electrical feedthrough for the interconnection are discussed in this review. (topical review)

  14. Cryogenic MEMS Technology for Sensing Applications Project

    Data.gov (United States)

    National Aeronautics and Space Administration — The development of cryogenic microwave components, such as focal plane polarization modulators, first requires an RF MEMS switching technology that operates...

  15. MEMS Bragg grating force sensor

    DEFF Research Database (Denmark)

    Reck, Kasper; Thomsen, Erik Vilain; Hansen, Ole

    2011-01-01

    We present modeling, design, fabrication and characterization of a new type of all-optical frequency modulated MEMS force sensor based on a mechanically amplified double clamped waveguide beam structure with integrated Bragg grating. The sensor is ideally suited for force measurements in harsh...... environments and for remote and distributed sensing and has a measured sensitivity of -14 nm/N, which is several times higher than what is obtained in conventional fiber Bragg grating force sensors. © 2011 Optical Society of America....

  16. Micro-fabrication of three dimensional pyrolysed carbon microelectrodes

    DEFF Research Database (Denmark)

    2017-01-01

    ; soft baking the photoresist layer; performing a full depth exposure with UV light through a first mask; performing a partial depth exposure with UV light through a second mask; wherein the full depth exposure and the partial depth exposure are aligned to ensure that the first and second latent images...... are connected to each other; post-exposure baking the photoresist layer; and developing the microscale patterned resist template as a free-standing structure of cross-linked resist with lateral hanging structures that are supported by vertical support structures at a free height above the substrate. The method...... is characterized by a soft baking temperature below 70 °C. Repetitive coating and partial depth exposure allows for the fabrication of multiple level laterally interconnected structures. Carbonization of the resist template provides truly three-dimensional carbon microelectrode structures....

  17. Experiments on pumping of liquids using arrays of microelectrodes subjected to travelling wave potentials

    Energy Technology Data Exchange (ETDEWEB)

    Garcia-Sanchez, P; Ramos, A [Dpto. de Electronica y Electromagnetismo, Universidad de Sevilla, 41012 Sevilla (Spain); Green, Nicolas G; Morgan, H [School of Electronics and Computer Science, University of Southampton, SO17 1BJ Southampton (United Kingdom)], E-mail: pablogarcia@us.es

    2008-12-01

    Net fluid flow of electrolytes driven on an array of microelectrodes subjected to a travelling-wave potential is presented. Two sizes of platinum microelectrodes have been studied. In both arrays, at low voltages the liquid flows according to the prediction given by ac electroosmotic theory. At voltages above a threshold the fluid flow is reversed. Measurements of the electrical current when the microelectrode array is pumping the liquid are also reported. Transient behaviours in both electrical current and fluid velocity have been observed.

  18. Output-Feedback Control of a Chaotic MEMS Resonator for Oscillation Amplitude Enhancement

    Directory of Open Access Journals (Sweden)

    Alexander Jimenez-Triana

    2014-01-01

    Full Text Available The present work addresses the problem of chaos control in an electrostatic MEMS resonator by using an output-feedback control scheme. One of the unstable orbits immersed in the chaotic attractor is stabilized in order to produce a sustained oscillation of the movable plate composing the microstructure. The orbit is carefully chosen so as to produce a high amplitude oscillation. This approach allows the enhancement of oscillation amplitude of the resonator at a reduced control effort, since the unstable orbit already exists in the system and it is not necessary to spend energy to create it. Realistic operational conditions of the MEMS are considered including parametric uncertainties in the model and constraints due to the difficulty in measuring the speed of the plates of the microstructure. A control law is constructed recursively by using the technique of backstepping. Finally, numerical simulations are carried out to confirm the validity of the developed control scheme and to demonstrate the effect of controlling orbits immersed in the chaotic attractor.

  19. Challenges in the Packaging of MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Malshe, A.P.; Singh, S.B.; Eaton, W.P.; O' Neal, C.; Brown, W.D.; Miller, W.M.

    1999-03-26

    The packaging of Micro-Electro-Mechanical Systems (MEMS) is a field of great importance to anyone using or manufacturing sensors, consumer products, or military applications. Currently much work has been done in the design and fabrication of MEMS devices but insufficient research and few publications have been completed on the packaging of these devices. This is despite the fact that packaging is a very large percentage of the total cost of MEMS devices. The main difference between IC packaging and MEMS packaging is that MEMS packaging is almost always application specific and greatly affected by its environment and packaging techniques such as die handling, die attach processes, and lid sealing. Many of these aspects are directly related to the materials used in the packaging processes. MEMS devices that are functional in wafer form can be rendered inoperable after packaging. MEMS dies must be handled only from the chip sides so features on the top surface are not damaged. This eliminates most current die pick-and-place fixtures. Die attach materials are key to MEMS packaging. Using hard die attach solders can create high stresses in the MEMS devices, which can affect their operation greatly. Low-stress epoxies can be high-outgassing, which can also affect device performance. Also, a low modulus die attach can allow the die to move during ultrasonic wirebonding resulting to low wirebond strength. Another source of residual stress is the lid sealing process. Most MEMS based sensors and devices require a hermetically sealed package. This can be done by parallel seam welding the package lid, but at the cost of further induced stress on the die. Another issue of MEMS packaging is the media compatibility of the packaged device. MEMS unlike ICS often interface with their environment, which could be high pressure or corrosive. The main conclusion we can draw about MEMS packaging is that the package affects the performance and reliability of the MEMS devices. There is a

  20. Low Frequency Activity of Cortical Networks on Microelectrode Arrays is Differentially Altered by Bicuculline and Carbaryl

    Science.gov (United States)

    Thousands of chemicals need to be characterized for their neurotoxicity potential. Neurons grown on microelectrode arrays (MEAs) are an in vitro model used to screen chemicals for functional effects on neuronal networks. Typically, after removal of low frequency components, effec...

  1. Conductive Polymer Microelectrodes for on-chip measurement of transmitter release from living cells

    DEFF Research Database (Denmark)

    Larsen, Simon Tylsgaard; Matteucci, Marco; Taboryski, Rafael J.

    2012-01-01

    driven cell trapping inside closed chip devices. Conductive polymer microelectrodes were used to measure transmitter release using electrochemical methods such as cyclic voltammetry and constant potential amperometry. By measuring the oxidation current at a cyclic voltammogram, the concentration...

  2. Synchronizing microelectrode and electronic goniometer data using a pseudo-random binary signal.

    Science.gov (United States)

    Moore, Tyler Robert; Jacobs, Rennie Underwood; Yang, Alexander Cheung; Richter, Erich Oscar

    2013-04-01

    Intra-operative investigation of the subthalamic nucleus (STN) requires concurrent measurement of microelectrode voltage, electrode depth and joint movement during deep brain stimulation (DBS) surgery. Commercial solutions to this problem exist but are more expensive. Multiple instruments from different manufacturers can collect the same data, but data from incompatible instruments are collected on disparate clocks, precluding quantitative analysis. A pseudo-random binary signal recorded simultaneously by each set of instruments allows for chronological reconciliation. A custom program collects microelectrode data while simultaneously sending a pseudo-random binary signal to instruments measuring joint movement. The record of this signal is later used to express microelectrode voltage and joint position in a single chronological frame of reference. ClockSynch was used in 15 DBS procedures. After each surgery, records of microelectrode and joint movement were successfully chronologically reconciled. In conclusion, a pseudo-random binary signal integrates disparate systems of instrumentation at a significantly decreased cost.

  3. Direction Finding Using Multiple MEMS Acoustic Sensors

    Science.gov (United States)

    2015-09-01

    MEMS ACOUSTIC SENSORS by Daniel Wilmott September 2015 Thesis Advisor: Gamani Karunasiri Co-Advisor: Fabio Alves THIS PAGE INTENTIONALLY LEFT......resonance over an angular range of 120° with a maximum uncertainty of 3.4°. 14. SUBJECT TERMS MEMS , direction finding, Ormia ochracea, acoustic sensor

  4. Listening to MEMS : An acoustic vibrometer

    NARCIS (Netherlands)

    Yntema, Doekle Reinder; Haneveld, J.; Engelen, Johannes Bernardus Charles; Brookhuis, Robert Anton; Sanders, Remco G.P.; Wiegerink, Remco J.; Elwenspoek, Michael Curt

    2010-01-01

    new way to characterize vibrating MEMS devices is presented. Using an acoustic particle velocity sensor the coupled sound field is measured, which is a measure for the movement of the MEMS device. We present several possible applications of this measurement method. It can be used as a read-out

  5. A Teaching - Learning Framework for MEMS Education

    International Nuclear Information System (INIS)

    Sheeparamatti, B G; Angadi, S A; Sheeparamatti, R B; Kadadevaramath, J S

    2006-01-01

    Micro-Electro-Mechanical Systems (MEMS) technology has been identified as one of the most promising technologies in the 21st century. MEMS technology has opened up a wide array of unforeseen applications. Hence it is necessary to train the technocrats of tomorrow in this emerging field to meet the industrial/societal demands. The drive behind fostering of MEMS technology is the reduction in the cost, size, weight, and power consumption of the sensors, actuators, and associated electronics. MEMS is a multidisciplinary engineering and basic science area which includes electrical engineering, mechanical engineering, material science and biomedical engineering. Hence MEMS education needs a special approach to prepare the technocrats for a career in MEMS. The modern education methodology using computer based training systems (CBTS) with embedded modeling and simulation tools will help in this direction. The availability of computer based learning resources such as MATLAB, ANSYS/Multiphysics and rapid prototyping tools have contributed to proposition of an efficient teaching-learning framework for MEMS education presented in this paper. This paper proposes a conceptual framework for teaching/learning MEMS in the current technical education scenario

  6. Conductive Polymer Microelectrodes for on-chip measurement of transmitter release from living cells

    DEFF Research Database (Denmark)

    Larsen, Simon Tylsgaard; Matteucci, Marco; Taboryski, Rafael J.

    2012-01-01

    In this paper, we present techniques to trap a group of neuronal cells (PC 12) close to band microelectrodes and quantitatively measure cellular transmitter release. Different trapping approaches were investigated including coating of electrodes by layers enhancing cell attachment and by pressure...... driven cell trapping inside closed chip devices. Conductive polymer microelectrodes were used to measure transmitter release using electrochemical methods such as cyclic voltammetry and constant potential amperometry. By measuring the oxidation current at a cyclic voltammogram, the concentration...

  7. Electrodeposition of nickel onto steel, using a thermostatic cell and movable anode by a variable current

    International Nuclear Information System (INIS)

    Vega G, J.D.

    1994-01-01

    In this work, metallic coatings of nickel was made over carbon steel using two different electrolytic solutions: The Watts's bath and the nickel sulfamate bath, using a pulse variable current. The method use was the traditional method, its means a thermostatic cell and one movable anode, which is a few know technique nowadays, it allow realize depositions away from any laboratory or special workshop, it has the advantage to be a portable dispositive. At last of all the electro depositions the coatings quality was valuable by them physical properties like: adhesion, hardness, wrinkled and thickness. The best results was obtain by the Nickel sulfamate bath and movable anode, less in the thickness, which has higher on the thermostatic cell. The variable current was obtain by a Pulse Generator and a Cathodic galvanometer. (Author)

  8. A Movable Phantom Design for Quantitative Evaluation of Motion Correction Studies on High Resolution PET Scanners

    DEFF Research Database (Denmark)

    Olesen, Oline Vinter; Svarer, C.; Sibomana, M.

    2010-01-01

    , movable, mechanical PET phantom to simulate patients' head movements while being scanned. This can be used for evaluating motion correction methods. A low-cost phantom controlled by a rotary stage motor was built and tested for axial rotations of 1 degrees - 10 degrees with the multiple acquisition frame...... method. The phantom is able to perform stepwise and continuous axial rotations with submillimeter accuracy, and the movements are repeatable. The scans were acquired on the high resolution research tomograph dedicated brain scanner. The scans were reconstructed with the new 3-D ordered subset expectation...... maximization algorithm with modeling of the point spread function (3DOSEM-PSF), and they were corrected for motions based on external tracking information using the Polaris Vicra real-time stereo motion-tracking system. The new automatic, movable phantom has a robust design and is a potential quality...

  9. Carbon-Ring Microelectrode Arrays for Electrochemical Imaging of Single Cell Exocytosis: Fabrication and Characterization

    Science.gov (United States)

    Lin, Yuqing; Trouillon, Raphaël; Svensson, Maria I.; Keighron, Jacqueline D.; Cans, Ann-Sofie; Ewing, Andrew G.

    2012-01-01

    Fabrication of carbon microelectrode arrays, with up to 15 electrodes in total tips as small as 10 to 50 μm, is presented. The support structures of microelectrodes were obtained by pulling multiple quartz capillaries together to form hollow capillary arrays before carbon deposition. Carbon ring microelectrodes were deposited by pyrolysis of acetylene in the lumen of these quartz capillary arrays. Each carbon deposited array tip was filled with epoxy, followed by beveling of the tip of the array to form a deposited carbon-ring microelectrode array (CRMA). Both the number of the microelectrodes in the array and the tip size are independently tunable. These CRMAs have been characterized using scanning electron microscopy, energy dispersive X-ray spectroscopy, and electrogenerated chemiluminescence. Additionally, the electrochemical properties were investigated with steady-state voltammetry. In order to demonstrate the utility of these fabricated microelectrodes in neurochemistry, CRMAs containing eight microring electrodes were used for electrochemical monitoring of exocytotic events from single PC12 cells. Subcellular temporal heterogeneities in exocytosis (ie. cold spots vs. hot spots) were successfully detected with the CRMAs. PMID:22339586

  10. Highly sensitive detection of exocytotic dopamine release using a gold-nanoparticle-network microelectrode.

    Science.gov (United States)

    Adams, Kelly L; Jena, Bikash Kumar; Percival, Stephen J; Zhang, Bo

    2011-02-01

    Here we report a new type of microelectrode sensor for single-cell exocytotic dopamine release. The new microsensor is built by forming a gold-nanoparticle (AuNP) network on a carbon fiber microelectrode. First a gold surface is obtained on a carbon fiber microdisk electrode by partially etching away the carbon followed by electrochemical deposition of gold into the pore. The gold surface is chemically functionalized with a sol-gel silicate network derived from (3-mercaptopropyl)trimethoxysilane (MPTS). A AuNP network is formed by immobilizing Au nanoparticles onto the thiol groups in the sol-gel silicate network. The AuNP-network microelectrode has been characterized by scanning electron microscopy (SEM) and steady-state voltammetry. The AuNP-network microelectrode has been used for amperometric detection of exocytotic dopamine secretion from individual pheochromocytoma (PC12) cells. The results show significant differences in the kinetic peak parameters including shorter rise time, decay time, and half-width as compared to a bare carbon fiber electrode equivalent. These results indicate AuNP-network microelectrodes possess an excellent sensing activity for single-cell exocytotic catecholamine release, specifically dopamine. Moreover, key advantageous properties inherent to bare carbon fiber microelectrodes (i.e., rigidity, flexibility, and small size) are maintained in addition to an observed prolonged shelf life stability and resistance to cellular debris fouling and dopamine polymerization.

  11. Conceptual design report for a Fusion Engineering Device sector-handling machine and movable manipulator system

    International Nuclear Information System (INIS)

    Watts, K.D.; Masson, L.S.; McPherson, R.S.

    1982-10-01

    Design requirements, trade studies, design descriptions, conceptual designs, and cost estimates have been completed for the Fusion Engineering Device sector handling machine, movable manipulator system, subcomponent handling machine, and limiter blade handling machine. This information will be used by the Fusion Engineering Design Center to begin to determine the cost and magnitude of the effort required to perform remote maintenance on the Fusion Engineering Device. The designs presented are by no means optimum, and the costs estimates are rough-order-of-magnitude

  12. Quantum theory of shuttling instability in a movable quantum dot array

    Science.gov (United States)

    Donarini, Andrea; Novotný, Tomás; Jauho, Antti-Pekka

    2004-04-01

    We study the shuttling instability in an array of three quantum dots the central one of which is movable. We extend the results by Armour and MacKinnon on this problem to a broader parameter regime. The results obtained by an efficient numerical method are interpreted directly using the Wigner distributions. We emphasize that the instability should be viewed as a crossover phenomenon rather than a clear-cut transition.

  13. Preoperative diagnosis and radiographic findings of a freely movable mucocele of the vermiform appendix

    Energy Technology Data Exchange (ETDEWEB)

    Shukunami, K.-I.; Kaneshima, M.; Kotsuji, F. [Fukui Medical Univ., Dept. of Obstetrics and Gynecology, Matsuoka-Cho, Yoshida-Gun, Fukui (Japan)

    2000-10-01

    Mucocele of the vermiform appendix is rarely diagnosed before surgery, although radiologic and ultrasonographic (US) findings have been reported. To our knowledge, there have been no previous reports of 2 different radiologic images of the cyst in the same patient during the preoperative period. We present 2 different shapes and locations of a freely movable mucocele of the appendix as it appeared before surgery. (author)

  14. Optical MEMS for Earth observation

    Science.gov (United States)

    Liotard, Arnaud; Viard, Thierry; Noell, Wilfried; Zamkotsian, Frédéric; Freire, Marco; Guldimann, Benedikt; Kraft, Stefan

    2017-11-01

    Due to the relatively large number of optical Earth Observation missions at ESA, this area is interesting for new space technology developments. In addition to their compactness, scalability and specific task customization, optical MEMS could generate new functions not available with current technologies and are thus candidates for the design of future space instruments. Most mature components for space applications are the digital mirror arrays, the micro-deformable mirrors, the programmable micro diffraction gratings and tiltable micromirrors. A first selection of market-pull and techno-push concepts is done. In addition, some concepts are coming from outside Earth Observation. Finally two concepts are more deeply analyzed. The first concept is a programmable slit for straylight control for space spectro-imagers. This instrument is a push-broom spectroimager for which some images cannot be exploited because of bright sources in the field-of-view. The proposed concept consists in replacing the current entrance spectrometer slit by an active row of micro-mirrors. The MEMS will permit to dynamically remove the bright sources and then to obtain a field-of-view with an optically enhanced signal-to-noise ratio. The second concept is a push-broom imager for which the acquired spectrum can be tuned by optical MEMS. This system is composed of two diffractive elements and a digital mirror array. The first diffractive element spreads the spectrum. A micromirror array is set at the location of the spectral focal plane. By putting the micro-mirrors ON or OFF, we can select parts of field-of-view or spectrum. The second diffractive element then recombines the light on a push-broom detector. Dichroics filters, strip filter, band-pass filter could be replaced by a unique instrument.

  15. Movable shark scales act as a passive dynamic micro-roughness to control flow separation.

    Science.gov (United States)

    Lang, Amy W; Bradshaw, Michael T; Smith, Jonathon A; Wheelus, Jennifer N; Motta, Philip J; Habegger, Maria L; Hueter, Robert E

    2014-09-01

    Shark scales on fast-swimming sharks have been shown to be movable to angles in excess of 50°, and we hypothesize that this characteristic gives this shark skin a preferred flow direction. During the onset of separation, flow reversal is initiated close to the surface. However, the movable scales would be actuated by the reversed flow thereby causing a greater resistance to any further flow reversal and this mechanism would disrupt the process leading to eventual flow separation. Here we report for the first time experimental evidence of the separation control capability of real shark skin through water tunnel testing. Using skin samples from a shortfin mako Isurus oxyrinchus, we tested a pectoral fin and flank skin attached to a NACA 4412 hydrofoil and separation control was observed in the presence of movable shark scales under certain conditions in both cases. We hypothesize that the scales provide a passive, flow-actuated mechanism acting as a dynamic micro-roughness to control flow separation.

  16. Movable shark scales act as a passive dynamic micro-roughness to control flow separation

    International Nuclear Information System (INIS)

    Lang, Amy W; Bradshaw, Michael T; Smith, Jonathon A; Wheelus, Jennifer N; Motta, Philip J; Habegger, Maria L; Hueter, Robert E

    2014-01-01

    Shark scales on fast-swimming sharks have been shown to be movable to angles in excess of 50°, and we hypothesize that this characteristic gives this shark skin a preferred flow direction. During the onset of separation, flow reversal is initiated close to the surface. However, the movable scales would be actuated by the reversed flow thereby causing a greater resistance to any further flow reversal and this mechanism would disrupt the process leading to eventual flow separation. Here we report for the first time experimental evidence of the separation control capability of real shark skin through water tunnel testing. Using skin samples from a shortfin mako Isurus oxyrinchus, we tested a pectoral fin and flank skin attached to a NACA 4412 hydrofoil and separation control was observed in the presence of movable shark scales under certain conditions in both cases. We hypothesize that the scales provide a passive, flow-actuated mechanism acting as a dynamic micro-roughness to control flow separation. (paper)

  17. Development of movable mask system to cope with high beam current

    International Nuclear Information System (INIS)

    Suetsugu, Y.; Shibata, K.; Sanami, T.; Kageyama, T.; Takeuchi, Y.

    2003-01-01

    The KEK B factory (KEKB), a high current electron-positron collider, has a movable mask (or collimator) system to reduce the background noise in the BELLE detector coming from spent particles. The early movable masks, however, had severe problems of heating, arcing, and vacuum leaks over the stored beam current of several hundred mA. The cause is intense trapped higher order modes (HOMs) excited at the mask head, where the cross section of the beam chamber changed drastically. The mask head, made of copper-tungsten alloy or pure copper, was frequently damaged by hitting of the high energy beam at the same time. Since the problems of the mask were revealed, several kinds of improved masks have been designed employing rf technologies in dealing with the HOM and installed to the ring step by step. Much progress has come from adopting a trapped-mode free structure, where the mask was a bent chamber itself. Recently the further improved mask with a reduced HOM design or HOM dampers was developed to suppress the heating of vacuum components near the mask due to the HOM traveling from the mask. To avoid damage to the mask head, on the other hand, a titanium mask head was tried. The latest masks are working as expected now at the stored beam current of 1.5 A. Presented are the problems and experiences on the movable mask system for the KEKB, which are characteristic of and common in a high intensity accelerator

  18. Experiences and future plans of movable mask system for the high current collider KEK B-factory

    International Nuclear Information System (INIS)

    Suetsugu, Yusuke; Kageyama, Tatsuya; Takeuchi, Yasunao; Kanazawa, Ken-ichi; Satoh, Kotarou; Sanami, Toshiya; Hirayama, Hideo

    2002-01-01

    The movable mask is a special device for an accelerator that cuts off spent particles near the beam orbit and reduces background of the detector. For the KEKB, an electron/positron collider with two rings, sixteen movable masks had been installed for each ring. The originally designed masks, however, revealed severe troubles of heating, arcing and vacuum leaks at the stored beam currents of several hundreds mA. Several kinds of improved masks had been designed employing RF technologies and were installed to the ring step by step. The latest masks are working well except for the grooves on the mask head. Here the problems of movable masks so far are summarized and the structures of the latest movable masks and their status are presented. (author)

  19. Development of MEMS photoacoustic spectroscopy

    Energy Technology Data Exchange (ETDEWEB)

    Robinson, Alex Lockwood; Eichenfield, Matthew S.; Griffin, Benjamin; Harvey, Heidi Alyssa; Nielson, Gregory N.; Okandan, Murat; Langlois, Eric; Resnick, Paul James; Shaw, Michael J.; Young, Ian; Givler, Richard C.; Reinke, Charles M.

    2014-01-01

    After years in the field, many materials suffer degradation, off-gassing, and chemical changes causing build-up of measurable chemical atmospheres. Stand-alone embedded chemical sensors are typically limited in specificity, require electrical lines, and/or calibration drift makes data reliability questionable. Along with size, these "Achilles' heels" have prevented incorporation of gas sensing into sealed, hazardous locations which would highly benefit from in-situ analysis. We report on development of an all-optical, mid-IR, fiber-optic based MEMS Photoacoustic Spectroscopy solution to address these limitations. Concurrent modeling and computational simulation are used to guide hardware design and implementation.

  20. Micro electromechanical systems (MEMS) for mechanical engineers

    Energy Technology Data Exchange (ETDEWEB)

    Lee, A. P., LLNL

    1996-11-18

    The ongoing advances in Microelectromechanical Systems (MEMS) are providing man-kind the freedom to travel to dimensional spaces never before conceivable. Advances include new fabrication processes, new materials, tailored modeling tools, new fabrication machines, systems integration, and more detailed studies of physics and surface chemistry as applied to the micro scale. In the ten years since its inauguration, MEMS technology is penetrating industries of automobile, healthcare, biotechnology, sports/entertainment, measurement systems, data storage, photonics/optics, computer, aerospace, precision instruments/robotics, and environment monitoring. It is projected that by the turn of the century, MEMS will impact every individual in the industrial world, totaling sales up to $14 billion (source: System Planning Corp.). MEMS programs in major universities have spawned up all over the United States, preparing the brain-power and expertise for the next wave of MEMS breakthroughs. It should be pointed out that although MEMS has been initiated by electrical engineering researchers through the involvement of IC fabrication techniques, today it has evolved such that it requires a totally multi-disciplinary team to develop useful devices. Mechanical engineers are especially crucial to the success of MEMS development, since 90% of the physical realm involved is mechanical. Mechanical engineers are needed for the design of MEMS, the analysis of the mechanical system, the design of testing apparatus, the implementation of analytical tools, and the packaging process. Every single aspect of mechanical engineering is being utilized in the MEMS field today, however, the impact could be more substantial if more mechanical engineers are involved in the systems level designing. In this paper, an attempt is made to create the pathways for a mechanical engineer to enter in the MEMS field. Examples of application in optics and medical devices will be used to illustrate how mechanical

  1. Optical-fiber-interconnected MEMS sensors and actuators

    Science.gov (United States)

    Miller, Michael B.; Meller, Scott A.; Wavering, Thomas A.; Greene, Jonathan A.; Murphy, Kent A.

    1998-07-01

    Microelectromechanical systems or MEMS are miniature devices that have several advantages over conventional sensing and actuating technology. MEMS devices benefit form well developed integrated circuit production methods which ensure high volume, high yield processes that create low-cost sensors and actuators. OPtical fiber interconnected MEMS will provide new functionality in MEMS devices such as multiplexed operation for distributed sensing applications. This paper presents approaches in optical fiber to MEMS interfacing and some preliminary results.

  2. Discovery of Undescribed Brain Tissue Changes Around Implanted Microelectrode Arrays

    Directory of Open Access Journals (Sweden)

    Himanshi Desai

    2012-01-01

    Full Text Available Brain-implantable microelectrode arrays are devicesdesigned to record or electrically stimulate the activity ofneurons in the brain. These devices hold the potential tohelp treat epilepsy, paralysis, blindness, and deafness, andalso provide researchers with insights into a varietyof neural processes, such as memory formation.While these devices have a very promising future,researchers are discovering that their long-termfunctionality is greatly limited by the brain’s naturalimmune response to foreign objects. To improve thefunctional lifetime of these devices, one solution lies infully characterizing and understanding this tissue response.Roles for microglia and astrocytes in this biologicalresponse have been characterized. However, changesto oligodendrocytes, cells that myelinate axons, remainpoorly understood. These cells provide insulationto the axons, which is required for proper neuralfunctioning. Here we report on the changes that occurwith oligodendrocyte processes in tissue aroundmicroelectrode implants in the brain.Six rats were surgically implanted with microelectrodearrays and allowed to recover for 1, 2, or 4 weeks.Subjects were then sacrificed and the brain tissue wasprocessed using our recently developed method, Device-Capture Histology. Immunohistochemistry and confocalmicroscopy was employed to assess the responsearound the device. Results indicated a decrease inoligodendrocyte density and a loss in typical directionalorientation of oligodendrocyte processes in tissue near thedevice. These results suggest alterations in the underlyingneuronal networks around these devices, which maygreatly impact the current functional utility of thesepromising devices.

  3. Microelectrode measurements of local mass transport rates in heterogeneous biofilms.

    Science.gov (United States)

    Rasmussen, K; Lewandowski, Z

    1998-08-05

    Microelectrodes were used to measure oxygen profiles and local mass transfer coefficient profiles in biofilm clusters and interstitial voids. Both profiles were measured at the same location in the biofilm. From the oxygen profile, the effective diffusive boundary layer thickness (DBL) was determined. The local mass transfer coefficient profiles provided information about the nature of mass transport near and within the biofilm. All profiles were measured at three different average flow velocities, 0.62, 1.53, and 2.60 cm sec-1, to determine the influence of flow velocity on mass transport. Convective mass transport was active near the biofilm/liquid interface and in the upper layers of the biofilm, independent of biofilm thickness and flow velocity. The DBL varied strongly between locations for the same flow velocities. Oxygen and local mass transfer coefficient profiles collected through a 70 micrometer thick cluster revealed that a cluster of that thickness did not present any significant mass transport resistance. In a 350 micrometer thick biofilm cluster, however, the local mass transfer coefficient decreased gradually to very low values near the substratum. This was hypothetically attributed to the decreasing effective diffusivity in deeper layers of biofilms. Interstitial voids between clusters did not seem to influence the local mass transfer coefficients significantly for flow velocities of 1.53 and 2.60 cm sec-1. At a flow velocity of 0.62 cm sec-1, interstitial voids visibly decreased the local mass transfer coefficient near the bottom. Copyright 1998 John Wiley & Sons, Inc.

  4. Hygroscopic particle behavior studied by interdigitated array microelectrode impedance sensors.

    Science.gov (United States)

    Schindelholz, Eric; Tsui, Lok-kun; Kelly, Robert G

    2014-01-09

    The hygroscopic behavior of soluble salts bears importance in many research fields including atmospheric sciences, corrosion, porous building materials, and pharmaceuticals. Several methods have been used to study deliquescence (solid to liquid) and efflorescence (liquid to solid) phase transitions of these salts. In this study, we measured the deliquescence and efflorescence RH values of single salt microparticles deposited on an interdigitated microelectrode sensor via electrical impedance. The salts examined were NaCl, LiCl, NaBr, KCl, and MgCl2. Measured values were in agreement with in situ optical microscopic observations and, with the exception of MgCl2, literature values. In the case of MgCl2, deliquescence occurred at 33% RH and 12-15% RH, with the latter range being previously unreported. The depressed deliquescence RH was hypothesized to be a result of the formation of a metastable MgCl2 hydrate. Incomplete efflorescence of MgCl2 was also observed after exposure to method as an alternative or complementary method for study of bulk-phase transitions of substrate-deposited particles across a broad RH range. These findings also demonstrate the utility of this method for detection of fluid trapping which cannot be directly ascertained by gravimetric and line-of-sight techniques commonly used in the study of hygroscopic particles.

  5. Performance of ultra-high-density microelectrode arrays

    Energy Technology Data Exchange (ETDEWEB)

    Gunning, D.E. [Department of Physics and Astronomy, University of Glasgow, Glasgow G12 8QQ (United Kingdom)]. E-mail: d.gunning@physics.gla.ac.uk; Chichilnisky, E.J. [Salk Institute for Biological Studies, La Jolla, CA 92037 6099 (United States); Litke, A.M. [Santa Cruz Institute forParticle Physics, Santa Cruz, CA 95064 (United States); O' Shea, V. [Department of Physics and Astronomy, University of Glasgow, Glasgow G12 8QQ (United Kingdom); Smith, K.M. [Department of Physics and Astronomy, University of Glasgow, Glasgow G12 8QQ (United Kingdom); Mathieson, K. [Department of Physics and Astronomy, University of Glasgow, Glasgow G12 8QQ (United Kingdom)

    2007-06-11

    Imaging the electrical output activity of biological cells is important to gain an understanding of how cell networks process information. This has implications for the understanding of brain processing, such as that performed by the retina in encoding the visual scene. The performance and electrical quality of a state-of-the-art high-density 519-microelectrode array, that recorded simultaneously from hundreds of live retinal output cells (ganglion cells) is reported on. The fabrication process for these devices has been optimised and their electrical characteristics examined. The electrode arrays typically exhibit an impedance of {approx}200 k{omega} at 1 kHz and the RMS noise of the whole recording system is 7 {mu}V with a signal to noise ratio of 20:1. With a view to direct stimulation of retinal ganglion cells, a low impedance Z=300 k{omega} iridium oxide interface capable of delivering large currents Q {sub cap}=4 mC/cm{sup 2} to cells was also developed.

  6. Editor's highlight: Evaluation of a Microelectrode Array-based ...

    Science.gov (United States)

    Thousands of compounds in the environment have not been characterized for developmental neurotoxicity (DNT) hazard. To address this issue, methods to screen compounds rapidly for DNT hazard evaluation are necessary and are being developed for key neurodevelopmental processes. In order to develop an assay for network formation, the current study evaluated effects of a training set of chemicals on network ontogeny by measuring spontaneous electrical activity in neural networks grown on microelectrode arrays (MEA). Rat (0-24 h old) primary cortical cells were plated in 48 well MEA plates and exposed to six compounds: acetaminophen, bisindolylmaleimide-1 (Bis-1), domoic acid, mevastatin, sodium orthovanadate, and loperamide for a period of 12 days. Spontaneous network activity was recorded on days 2, 5, 7, 9, and 12 and viability was assessed using the Cell Titer Blue® assay on day 12. Network activity (e.g. mean firing rate (MFR), burst rate (BR), etc), increased between days 5 and 12. Random Forest analysis indicated that across all compounds and times, temporal correlation of firing patterns (r), MFR, BR, #of active electrodes and % of spikes in a burst were the most influential parameters in separating control from treated wells. All compounds except acetaminophen (≤ 30 µM) caused concentration-related effects on one or more of these parameters. Domoic acid and sodium orthovanadate altered several of these parameters in the absence of cytotoxicity. Although

  7. Performance of ultra-high-density microelectrode arrays

    Science.gov (United States)

    Gunning, D. E.; Chichilnisky, E. J.; Litke, A. M.; O'Shea, V.; Smith, K. M.; Mathieson, K.

    2007-06-01

    Imaging the electrical output activity of biological cells is important to gain an understanding of how cell networks process information. This has implications for the understanding of brain processing, such as that performed by the retina in encoding the visual scene. The performance and electrical quality of a state-of-the-art high-density 519-microelectrode array, that recorded simultaneously from hundreds of live retinal output cells (ganglion cells) is reported on. The fabrication process for these devices has been optimised and their electrical characteristics examined. The electrode arrays typically exhibit an impedance of ˜200 kΩ at 1 kHz and the RMS noise of the whole recording system is 7 μV with a signal to noise ratio of 20:1. With a view to direct stimulation of retinal ganglion cells, a low impedance Z=300 kΩ iridium oxide interface capable of delivering large currents Qcap=4 mC/cm 2 to cells was also developed.

  8. Large-Area Microelectrode Arrays for Recording of Neural Signals

    Science.gov (United States)

    Mathieson, K.; Kachiguine, S.; Adams, C.; Cunningham, W.; Gunning, D.; O'Shea, V.; Smith, K. M.; Chichilnisky, E. J.; Litke, A. M.; Sher, A.; Rahman, M.

    2004-10-01

    To understand the neural code, that the retina uses to communicate the visual scene to the brain, large-area microelectrode arrays are needed to record retinal signals simultaneously from many recording sites. This will give a valuable insight into how large biological neural networks (such as the brain) process information, and may also be important in the development of a retinal prosthesis as a potential cure for some forms of blindness. We have used the transparent conductor indium tin oxide to fabricated electrode arrays with approximately 500 electrodes spaced at 60 /spl mu/m. The fabrication procedures include photolithography, electron-beam lithography, chemical etching and reactive-ion etching. These arrays have been tested electrically using impedance measurements over the range of frequencies important when recording extracellular action potentials (0.1-100kHz). The data has been compared to a circuit model of the electrode/electrolyte interface. One type of array (512 electrodes) behaves as theory would dictate and exhibits an impedance of 200 k/spl Omega/ at 1kHz. The other array (519 electrodes) has an impedance of 350 k/spl Omega/ at this frequency, which is higher than predicted by the models. This can perhaps be attributed to the difference in fabrication techniques. The 512-electrode array has been coupled to low-noise amplification circuitry and has recorded signals from a variety of retinal tissues. Example in vitro recordings are shown here.

  9. Investigating brain functional evolution and plasticity using microelectrode array technology.

    Science.gov (United States)

    Napoli, Alessandro; Obeid, Iyad

    2015-10-01

    The aim of this work was to investigate long and short-term plasticity responsible for memory formation in dissociated neuronal networks. In order to address this issue, a set of experiments was designed and implemented in which the microelectrode array electrode grid was divided into four quadrants, two of which were chronically stimulated, every two days for one hour with a stimulation paradigm that varied over time. Overall network and quadrant responses were then analyzed to quantify what level of plasticity took place in the network and how this was due to the stimulation interruption. The results demonstrate that there were no spatial differences in the stimulus-evoked activity within quadrants. Furthermore, the implemented stimulation protocol induced depression effects in the neuronal networks as demonstrated by the consistently lower network activity following stimulation sessions. Finally, the analysis demonstrated that the inhibitory effects of the stimulation decreased over time, thus suggesting a habituation phenomenon. These findings are sufficient to conclude that electrical stimulation is an important tool to interact with dissociated neuronal cultures, but localized stimuli are not enough to drive spatial synaptic potentiation or depression. On the contrary, the ability to modulate synaptic temporal plasticity was a feasible task to achieve by chronic network stimulation. Copyright © 2015 Elsevier Inc. All rights reserved.

  10. Applying a foil queue micro-electrode in micro-EDM to fabricate a 3D micro-structure

    Science.gov (United States)

    Xu, Bin; Guo, Kang; Wu, Xiao-yu; Lei, Jian-guo; Liang, Xiong; Guo, Deng-ji; Ma, Jiang; Cheng, Rong

    2018-05-01

    Applying a 3D micro-electrode in a micro electrical discharge machining (micro-EDM) can fabricate a 3D micro-structure with an up and down reciprocating method. However, this processing method has some shortcomings, such as a low success rate and a complex process for fabrication of 3D micro-electrodes. By focusing on these shortcomings, this paper proposed a novel 3D micro-EDM process based on the foil queue micro-electrode. Firstly, a 3D micro-electrode was discretized into several foil micro-electrodes and these foil micro-electrodes constituted a foil queue micro-electrode. Then, based on the planned process path, foil micro-electrodes were applied in micro-EDM sequentially and the micro-EDM results of each foil micro-electrode were able to superimpose the 3D micro-structure. However, the step effect will occur on the 3D micro-structure surface, which has an adverse effect on the 3D micro-structure. To tackle this problem, this paper proposes to reduce this adverse effect by rounded corner wear at the end of the foil micro-electrode and studies the impact of machining parameters on rounded corner wear and the step effect on the micro-structure surface. Finally, using a wire cutting voltage of 80 V, a current of 0.5 A and a pulse width modulation ratio of 1:4, the foil queue micro-electrode was fabricated by wire electrical discharge machining. Also, using a pulse width of 100 ns, a pulse interval of 200 ns, a voltage of 100 V and workpiece material of 304# stainless steel, the foil queue micro-electrode was applied in micro-EDM for processing of a 3D micro-structure with hemispherical features, which verified the feasibility of this process.

  11. Design of Surface Micromachined Compliant MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Bradley, Joe Anthony [Iowa State Univ., Ames, IA (United States)

    2002-12-31

    The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a micro-compliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMs, most have used comb-drive actuation methods and bulk micromachining processes. This research focused on fully-compliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms.

  12. Design of Surface micromachined Compliant MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Bradley, Joe Anthony [Iowa State Univ., Ames, IA (United States)

    2001-01-01

    The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a micro-compliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMS, most have used comb-drive actuation methods and bulk micromachining processes. This research focuses on fully-compliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms.

  13. Optical inspection of hidden MEMS structures

    Science.gov (United States)

    Krauter, Johann; Gronle, Marc; Osten, Wolfgang

    2017-06-01

    Micro-electro-mechanical system's (MEMS) applications have greatly expanded over the recent years, and the MEMS industry has grown almost exponentially. One of the strongest drivers are the automotive and consumer markets. A 100% test is necessary especially in the production of automotive MEMS sensors since they are subject to safety relevant functions. This inspection should be carried out before dicing and packaging since more than 90% of the production costs are incurred during these steps. An electrical test is currently being carried out with each MEMS component. In the case of a malfunction, the defect can not be located on the wafer because the MEMS are no longer optically accessible due to the encapsulation. This paper presents a low coherence interferometer for the topography measurement of MEMS structures located within the wafer stack. Here, a high axial and lateral resolution is necessary to identify defects such as stuck or bent MEMS fingers. First, the boundary conditions for an optical inspection system will be discussed. The setup is then shown with some exemplary measurements.

  14. Sleep estimates using microelectromechanical systems (MEMS).

    Science.gov (United States)

    te Lindert, Bart H W; Van Someren, Eus J W

    2013-05-01

    Although currently more affordable than polysomnography, actigraphic sleep estimates have disadvantages. Brand-specific differences in data reduction impede pooling of data in large-scale cohorts and may not fully exploit movement information. Sleep estimate reliability might improve by advanced analyses of three-axial, linear accelerometry data sampled at a high rate, which is now feasible using microelectromechanical systems (MEMS). However, it might take some time before these analyses become available. To provide ongoing studies with backward compatibility while already switching from actigraphy to MEMS accelerometry, we designed and validated a method to transform accelerometry data into the traditional actigraphic movement counts, thus allowing for the use of validated algorithms to estimate sleep parameters. Simultaneous actigraphy and MEMS-accelerometry recording. Home, unrestrained. Fifteen healthy adults (23-36 y, 10 males, 5 females). None. Actigraphic movement counts/15-sec and 50-Hz digitized MEMS-accelerometry. Passing-Bablok regression optimized transformation of MEMS-accelerometry signals to movement counts. Kappa statistics calculated agreement between individual epochs scored as wake or sleep. Bland-Altman plots evaluated reliability of common sleep variables both between and within actigraphs and MEMS-accelerometers. Agreement between epochs was almost perfect at the low, medium, and high threshold (kappa = 0.87 ± 0.05, 0.85 ± 0.06, and 0.83 ± 0.07). Sleep parameter agreement was better between two MEMS-accelerometers or a MEMS-accelerometer and an actigraph than between two actigraphs. The algorithm allows for continuity of outcome parameters in ongoing actigraphy studies that consider switching to MEMS-accelerometers. Its implementation makes backward compatibility feasible, while collecting raw data that, in time, could provide better sleep estimates and promote cross-study data pooling.

  15. Adhesion aspects in MEMS/NEMS

    CERN Document Server

    Kim, Seong H; Mittal, Kash L

    2012-01-01

    Phenomena associated with the adhesion interaction of surfaces have been a critical aspect of micro- and nanosystem development and performance since the first MicroElectroMechanicalSystems(MEMS) were fabricated. These phenomena are ubiquitous in nature and are present in all systems, however MEMS devices are particularly sensitive to their effects owing to their small size and limited actuation force that can be generated. Extension of MEMS technology concepts to the nanoscale and development of NanoElectroMechanicalSystems(NEMS) will result in systems even more strongly influenced by surface

  16. Pressure reciprocity calibration of a MEMS microphone.

    Science.gov (United States)

    Wagner, Randall P; Fick, Steven E

    2017-09-01

    This article reports the first use of the pressure reciprocity technique to calibrate a micro-electromechanical system (MEMS) microphone. This standardized primary calibration method is conventionally used to calibrate laboratory standard microphones. Results for the pressure reciprocity calibration of a MEMS microphone and two laboratory standard microphones are presented for the frequency range 100-10 000 Hz. Because the amplifier in the MEMS microphone package prevents reciprocal operation, this microphone was used only as a receiver of sound. A description of the procedure is presented along with checks of the measurement results and data regarding the uncertainties of these results.

  17. Practical guide to RF-MEMS

    CERN Document Server

    Iannacci, Jacopo

    2013-01-01

    Closes the gap between hardcore-theoretical and purely experimental RF-MEMS books. The book covers, from a practical viewpoint, the most critical steps that have to be taken in order to develop novel RF-MEMS device concepts. Prototypical RF-MEMS devices, both including lumped components and complex networks, are presented at the beginning of the book as reference examples, and these are then discussed from different perspectives with regard to design, simulation, packaging, testing, and post-fabrication modeling. Theoretical concepts are introduced when necessary to complement the practical

  18. Fabrication of thin vertical mirrors through plasma etch and KOH:IPA polishing for integration into MEMS electrostatic actuators

    Science.gov (United States)

    Huda, M. Q.; Amin, T. M. F.; Ning, Y.; McKinnon, G.; Tulip, J.; Jäger, W.

    2013-03-01

    We developed a process for the fabrication of thin vertical mirrors as integrated structures of MEMS electrostatic actuators. The mirrors can be implemented as a vertical extension of the actuator sidewall, or can be positioned at any movable part of the actuator. The process involves the fabrication of a mesa structure on the handle layer of a silicon-oninsulator (SOI) wafer through deep reactive ion etching (DRIE). The etch/passivation cycles of the DRIE process were optimized to achieve vertical etch profiles with a depth of up to 200 μm with an aspect ratio of 10:1. The DRIE process introduced typical etch scallops with peak-to-valley and rms roughnesses on the order of 100 nm and 30 nm, respectively. A mask layer was used to pattern a 2.1 μm sacrificial oxide layer for the mesa structure. A second mask layer allowed us to define a large etch cavity for handle layer back-etch. The DRIE etched mesa structure was then etched with diluted potassium hydroxide (KOH) in isopropyl alcohol (IPA). Temperature and etch concentration were optimized for the removal of etch scallops without the formation of etch facets. The etch scallops were almost completely removed and mirror quality surfaces were achieved. The developed mesa structures are suitable for integration into actuators that are patterned in the device layer. A third masking layer, aligned through infrared camera, was used to position the thin vertical mirror at the actuator sidewall. The process provides design flexibility in integrating vertical mirrors of adjustable dimensions to movable elements of MEMS structures.

  19. Development of Si Double-Sided Microelectrode for Platform of Brain Signal Processing System

    Science.gov (United States)

    Kobayashi, Risato; Kanno, Soichiro; Sanghoon, Lee; Jicheol, Bea; Fukushima, Takafumi; Sakamoto, Kazuhiro; Katayama, Norihiro; Mushiake, Hajime; Tanaka, Tetsu; Koyanagi, Mitsumasa

    2009-04-01

    We have proposed a new implantable neural recording system, which we call the brain signal processing system (BSPS). In this system, LSI chips such as amplifiers, analog-to-digital converters, and multiplexers are integrated on the Si microelectrode array. To analyze the brain functions or to develop medical treatments for brain disorders, a high-density recording of action potentials is strongly required. To realize high-density recording of action potentials, we propose a novel Si double-sided microelectrode that has recording sites on both front and back sides. The back-side recording sites are connected to a recording apparatus by wire bonding through Si via holes. We fabricated the carefully designed Si double-sided microelectrode and evaluated the electrical characteristics of the Si microelectrode. The front- and back-side recording sites had impedance values of 2.5 and 2.7 MΩ at 1 kHz, respectively, which indicated that both recording sites have equivalent characteristics. An in vitro experiment of neuronal action potential recording using the fabricated Si double-sided microelectrode was performed. The CA1 areas of 400-µm-thick hippocampal slices obtained from the brains of guinea pigs were employed, and we successfully recorded neuronal action potentials from the recording sites of both sides.

  20. Chitosan coated carbon fiber microelectrode for selective in vivo detection of neurotransmitters in live zebrafish embryos

    Energy Technology Data Exchange (ETDEWEB)

    Ozel, Rifat Emrah [Department of Chemistry and Biomolecular Science, 8 Clarkson Ave, Potsdam, NY 136995810 (United States); Wallace, Kenneth N. [Department of Biology, Clarkson University, Potsdam, NY 136995810 (United States); Andreescu, Silvana, E-mail: eandrees@clarkson.edu [Department of Chemistry and Biomolecular Science, 8 Clarkson Ave, Potsdam, NY 136995810 (United States)

    2011-06-10

    Graphical abstract: Chitosan coated fiber electrodes are sensitive to serotonin detection while rejecting physiological levels of ascorbic acid interferences. - Abstract: We report the development of a chitosan modified carbon fiber microelectrode for in vivo detection of serotonin. We find that chitosan has the ability to reject physiological levels of ascorbic acid interferences and facilitate selective and sensitive detection of in vivo levels of serotonin, a common catecholamine neurotransmitter. Presence of chitosan on the microelectrode surface was investigated using scanning electron microscopy (SEM) and cyclic voltammetry (CV). The electrode was characterized using differential pulse voltammetry (DPV). A detection limit of 1.6 nM serotonin with a sensitivity of 5.12 nA/{mu}M, a linear range from 2 to 100 nM and a reproducibility of 6.5% for n = 6 electrodes were obtained. Chitosan modified microelectrodes selectively measure serotonin in presence of physiological levels of ascorbic acid. In vivo measurements were performed to measure concentration of serotonin in the live embryonic zebrafish intestine. The sensor quantifies in vivo intestinal levels of serotonin while successfully rejecting ascorbic acid interferences. We demonstrate that chitosan can be used as an effective coating to reject ascorbic acid interferences at carbon fiber microelectrodes, as an alternative to Nafion, and that chitosan modified microelectrodes are reliable tools for in vivo monitoring of changes in neurotransmitter levels.

  1. MEMS-based Circuits and Systems for Wireless Communication

    CERN Document Server

    Kaiser, Andreas

    2013-01-01

    MEMS-based Circuits and Systems for Wireless Communication provides comprehensive coverage of RF-MEMS technology from device to system level. This edited volume places emphasis on how system performance for radio frequency applications can be leveraged by Micro-Electro-Mechanical Systems (MEMS). Coverage also extends to innovative MEMS-aware radio architectures that push the potential of MEMS technology further ahead.  This work presents a broad overview of the technology from MEMS devices (mainly BAW and Si MEMS resonators) to basic circuits, such as oscillators and filters, and finally complete systems such as ultra-low-power MEMS-based radios. Contributions from leading experts around the world are organized in three parts. Part I introduces RF-MEMS technology, devices and modeling and includes a prospective outlook on ongoing developments towards Nano-Electro-Mechanical Systems (NEMS) and phononic crystals. Device properties and models are presented in a circuit oriented perspective. Part II focusses on ...

  2. Plateau-Shaped Flexible Polymer Microelectrode Array for Neural Recording

    Directory of Open Access Journals (Sweden)

    Jun-Min Kim

    2017-12-01

    Full Text Available Conventional polymer multielectrode arrays (MEAs have limitations resulting from a high Young’s modulus, including low conformability and gaps between the electrodes and neurons. These gaps are not a problem in soft tissues such as the brain, due to the repopulation phenomenon. However, gaps can result in signal degradation when recording from a fiber bundle, such as the spinal cord. Methods: We propose a method for fabricating flexible polydimethylsiloxane (PDMS-based MEAs featuring plateau-shaped microelectrodes. The proposed fabrication technique enables the electrodes on the surface of MEAs to make a tight connection to the neurons, because the wire of the MEA is fabricated to be plateau-shaped, as the Young’s modulus of PDMS is similar to soft tissues and PDMS follows the curvature of the neural tissue due to its high conformability compared to the other polymers. Injury caused by the movement of the MEAs can therefore be minimized. Each electrode has a diameter of 130 μm and the 8-channel array has a center-to-center electrode spacing of 300 μm. The signal-to-noise ratio of the plateau-shaped electrodes was larger than that of recessed electrodes because there was no space between the electrode and neural cell. Reliable neural recordings were possible by adjusting the position of the electrode during the experiment without trapping air under the electrodes. Simultaneous multi-channel neural recordings were successfully achieved from the spinal cord of rodents. We describe the fabrication technique, electrode 3D profile, electrode impedance, and MEA performance in in vivo experiments in rodents.

  3. Optical MEMS for chemical analysis and biomedicine

    CERN Document Server

    Jiang, Hongrui

    2016-01-01

    This book describes the current state of optical MEMS in chemical and biomedical analysis and brings together current trends and highlights topics representing the most exciting progress in recent years in the field.

  4. Advanced mechatronics and MEMS devices II

    CERN Document Server

    Wei, Bin

    2017-01-01

    This book introduces the state-of-the-art technologies in mechatronics, robotics, and MEMS devices in order to improve their methodologies. It provides a follow-up to "Advanced Mechatronics and MEMS Devices" (2013) with an exploration of the most up-to-date technologies and their applications, shown through examples that give readers insights and lessons learned from actual projects. Researchers on mechatronics, robotics, and MEMS as well as graduate students in mechanical engineering will find chapters on: Fundamental design and working principles on MEMS accelerometers Innovative mobile technologies Force/tactile sensors development Control schemes for reconfigurable robotic systems Inertial microfluidics Piezoelectric force sensors and dynamic calibration techniques ...And more. Authors explore applications in the areas of agriculture, biomedicine, advanced manufacturing, and space. Micro-assembly for current and future industries is also considered, as well as the design and development of micro and intel...

  5. MEMS and Nano-Technology Clean Room

    Data.gov (United States)

    Federal Laboratory Consortium — The MEMS and Nano-Technology Clean Room is a state-of-the-art, 800 square foot, Class 1000-capable facility used for development of micro and sub-micro scale sensors...

  6. Wireless MEMs BioSensor, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — Crossfield is proposing to develop a low cost, single chip plant bio-monitor using an embedded MEMs based infrared (IR) spectroscopy gas sensor for carbon dioxide...

  7. MEMS Gyroscope with Interferometric Detection, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — This SBIR Phase I project will develop a MEMS gyroscope that uses an ultra high resolution sensing technique for measuring proof mass motion. The goal is to...

  8. Cryogenic MEMS Pressure Sensor, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — A directly immersible cryogenic MEMS pressure sensor will be developed. Each silicon die will contain a vacuum-reference and a tent-like membrane. Offsetting thermal...

  9. MEMS Gyroscope with Interferometric Detection, Phase II

    Data.gov (United States)

    National Aeronautics and Space Administration — The proposed innovation is a novel MEMS gyroscope that uses micro-interferometric detection to measure the motion of the proof mass. Using an interferometric...

  10. Wireless MEMs BioSensor Project

    Data.gov (United States)

    National Aeronautics and Space Administration — Crossfield is proposing to develop a low cost, single chip plant bio-monitor using an embedded MEMs based infrared (IR) spectroscopy gas sensor for carbon dioxide...

  11. MEMS Shutter for Spectrometer Calibration Project

    Data.gov (United States)

    National Aeronautics and Space Administration —   We shall develop a MEMS shutter that is expected to have 2-3 g mass and consumeThis research will demonstrate fabrication of a low mass (~2-3 grams), low...

  12. SiC MEMS For Harsh Environments

    National Research Council Canada - National Science Library

    Bradley, Kenneth

    2003-01-01

    ... (specifically high temperature) material for both structural and electronic devices. Although shock testing of SiC MEMS devices under this program was not accomplished, subsequent work allowed for this testing to occur, with positive results...

  13. MEMS Sensors and Actuators Laboratory (MSAL)

    Data.gov (United States)

    Federal Laboratory Consortium — The MEMS Sensors and Actuators Laboratory (MSAL) in the A.J. Clark School of Engineering at the University of Maryland (UMD) was established in January 2000. Our lab...

  14. Fabrication of integrated metallic MEMS devices

    DEFF Research Database (Denmark)

    Yalcinkaya, Arda Deniz; Ravnkilde, Jan Tue; Hansen, Ole

    2002-01-01

    A simple and complementary metal oxide semiconductor (CMOS) compatible fabrication technique for microelectromechanical (MEMS) devices is presented. The fabrication technology makes use of electroplated metal layers. Among the fabricated devices, high quality factor microresonators...

  15. Picometer-Resolution MEMS Segmented DM Project

    Data.gov (United States)

    National Aeronautics and Space Administration — Microelectromechanical systems (MEMS) technology has the potential to create deformable mirrors (DM) with 10^4 actuators that have size, weight, and power...

  16. MEMS direction finding acoustic sensor

    Science.gov (United States)

    Karunasiri, Gamani; Alves, Fabio; Swan, William

    2017-06-01

    Conventional directional sound sensing systems employ an array of spatially separated microphones to achieve directivity. However, there are insects such as the Ormia ochracea fly that can determine the direction of sound using a miniature hearing organ much smaller than the wavelength of sound it detects. The fly's eardrums are coupled mechanically with a separation of only 0.5 mm and yet have a remarkable sensitivity to the direction of sound. The MEMS based sensor mimicking the fly's hearing system was fabricated using an SOI substrate with a 25 μm device layer. The sensor consists of two 1.5 mm x1.6 mm wings connected in the middle by a 2.7 mm x 30 μm bridge. The entire structure is connected to the substrate by two torsional legs at the center. The frequency response of the sensor showed two resonance frequencies at approximately 1.1 kHz (rocking) and 1.5 kHz (bending). The resonance at 1.1 kHz is due to rocking of the wings by twisting the legs and the other at 1.5 kHz is due to bending of the bridge. The response of the sensor was probed electronically using comb finger capacitors integrated to the edges of the wings and with the help of an MS3110 chip. A peak output voltage of about 9V/Pa was measured for sound incident normal to the device at the resonance frequency of the bending mode. The bearing of the incident sound under these conditions could be determined to within a few degrees. These findings indicate the potential use of the MEMS sensor to locate sound sources with high accuracy.

  17. Variable Emissivity Through MEMS Technology

    Science.gov (United States)

    Darrin, Ann Garrison; Osiander, Robert; Champion, John; Swanson, Ted; Douglas, Donya; Grob, Lisa M.; Powers, Edward I. (Technical Monitor)

    2000-01-01

    This paper discusses a new technology for variable emissivity (vari-e) radiator surfaces, which has significant advantages over traditional radiators and promises an alternative design technique for future spacecraft thermal control systems. All spacecraft rely on radiative surfaces to dissipate waste heat. These radiators have special coatings, typically with a low solar absorptivity and a high infrared-red emissivity, that are intended to optimize performance under the expected heat load and thermal sink environment. The dynamics of the heat loads and thermal environment make it a challenge to properly size the radiator and often require some means of regulating the heat rejection rate of the radiators in order to achieve proper thermal balance. Specialized thermal control coatings, which can passively or actively adjust their emissivity offer an attractive solution to these design challenges. Such systems would allow intelligent control of the rate of heat loss from a radiator in response to heat load and thermal environmental variations. Intelligent thermal control through variable emissivity systems is well suited for nano and pico spacecraft applications where large thermal fluctuations are expected due to the small thermal mass and limited electric resources. Presently there are three different types of vari-e technologies under development: Micro ElectroMechanical Systems (MEMS) louvers, Electrochromic devices, and Electrophoretic devices. This paper will describe several prototypes of micromachined (MEMS) louvers and experimental results for the emissivity variations measured on theses prototypes. It will further discuss possible actuation mechanisms and space reliability aspects for different designs. Finally, for comparison parametric evaluations of the thermal performances of the new vari-e technology and standard thermal control systems are presented in this paper.

  18. Digital holography for MEMS and microsystem metrology

    CERN Document Server

    Asundi, Anand

    2011-01-01

    Approaching the topic of digital holography from the practical perspective of industrial inspection, Digital Holography for MEMS and Microsystem Metrology describes the process of digital holography and its growing applications for MEMS characterization, residual stress measurement, design and evaluation, and device testing and inspection. Asundi also provides a thorough theoretical grounding that enables the reader to understand basic concepts and thus identify areas where this technique can be adopted. This combination of both practical and theoretical approach will ensure the

  19. Fabrication of integrated metallic MEMS devices

    DEFF Research Database (Denmark)

    Yalcinkaya, Arda Deniz; Ravnkilde, Jan Tue; Hansen, Ole

    2002-01-01

    A simple and complementary metal oxide semiconductor (CMOS) compatible fabrication technique for microelectromechanical (MEMS) devices is presented. The fabrication technology makes use of electroplated metal layers. Among the fabricated devices, high quality factor microresonators are characteri......A simple and complementary metal oxide semiconductor (CMOS) compatible fabrication technique for microelectromechanical (MEMS) devices is presented. The fabrication technology makes use of electroplated metal layers. Among the fabricated devices, high quality factor microresonators...

  20. Nano-tribology and materials in MEMS

    CERN Document Server

    Satyanarayana, N; Lim, Seh

    2013-01-01

    This book brings together recent developments in the areas of MEMS tribology, novel lubricants and coatings for nanotechnological applications, biomimetics in tribology and fundamentals of micro/nano-tribology. Tribology plays important roles in the functioning and durability of machines at small length scales because of the problems associated with strong surface adhesion, friction, wear etc. Recently, a number of studies have been conducted to understand tribological phenomena at nano/micro scales and many new tribological solutions for MEMS have been proposed.

  1. Challenges in the Packaging of MEMS

    Energy Technology Data Exchange (ETDEWEB)

    BROWN, WILLIAM D.; EATON, WILLIAM P.; MALSHE, AJAY P.; MILLER, WILLIAM M.; O' NEAL, CHAD; SINGH, SUSHILA B.

    1999-09-24

    Microelectromechanical Systems (MEMS) packaging is much different from conventional integrated circuit (IC) packaging. Many MEMS devices must interface to the environment in order to perform their intended function, and the package must be able to facilitate access with the environment while protecting the device. The package must also not interfere with or impede the operation of the MEMS device. The die attachment material should be low stress, and low outgassing, while also minimizing stress relaxation overtime which can lead to scale factor shifts in sensor devices. The fabrication processes used in creating the devices must be compatible with each other, and not result in damage to the devices. Many devices are application specific requiring custom packages that are not commercially available. Devices may also need media compatible packages that can protect the devices from harsh environments in which the MEMS device may operate. Techniques are being developed to handle, process, and package the devices such that high yields of functional packaged parts will result. Currently, many of the processing steps are potentially harmful to MEMS devices and negatively affect yield. It is the objective of this paper to review and discuss packaging challenges that exist for MEMS systems and to expose these issues to new audiences from the integrated circuit packaging community.

  2. Dynamic metasurface lens based on MEMS technology

    Directory of Open Access Journals (Sweden)

    Tapashree Roy

    2018-02-01

    Full Text Available In the recent years, metasurfaces, being flat and lightweight, have been designed to replace bulky optical components with various functions. We demonstrate a monolithic Micro-Electro-Mechanical System (MEMS integrated with a metasurface-based flat lens that focuses light in the mid-infrared spectrum. A two-dimensional scanning MEMS platform controls the angle of the lens along two orthogonal axes by ±9°, thus enabling dynamic beam steering. The device could be used to compensate for off-axis incident light and thus correct for aberrations such as coma. We show that for low angular displacements, the integrated lens-on-MEMS system does not affect the mechanical performance of the MEMS actuators and preserves the focused beam profile as well as the measured full width at half maximum. We envision a new class of flat optical devices with active control provided by the combination of metasurfaces and MEMS for a wide range of applications, such as miniaturized MEMS-based microscope systems, LIDAR scanners, and projection systems.

  3. A novel piezoresistive polymer nanocomposite MEMS accelerometer

    International Nuclear Information System (INIS)

    Seena, V; Hari, K; Prajakta, S; Ramgopal Rao, V; Pratap, Rudra

    2017-01-01

    A novel polymer MEMS (micro electro mechanical systems) accelerometer with photo-patternable polymer nanocomposite as a piezoresistor is presented in this work. Polymer MEMS Accelerometer with beam thicknesses of 3.3 µ m and embedded nanocomposite piezoresistive layer having a gauge factor of 90 were fabricated. The photosensitive nanocomposite samples were prepared and characterized for analyzing the mechanical and electrical properties and thereby ensuring proper process parameters for incorporating the piezoresistive layer into the polymer MEMS accelerometer. The microfabrication process flow and unit processes followed are extremely low cost with process temperatures below 100 °C. This also opens up a new possibility for easy integration of such polymer MEMS with CMOS (complementary metal oxide semiconductor) devices and circuits. The fabricated devices were characterized using laser Doppler vibrometer (LDV) and the devices exhibited a resonant frequency of 10.8 kHz and a response sensitivity of 280 nm g −1 at resonance. The main focus of this paper is on the SU-8/CB nanocomposite piezoresistive MEMS accelerometer technology development which covers the material and the fabrication aspects of these devices. CoventorWare FEA analysis performed using the extracted material properties from the experimental characterization which are in close agreement to performance parameters of the fabricated devices is also discussed. The simulated piezoresistive polymer MEMS devices showed an acceleration sensitivity of 126 nm g −1 and 82 ppm of Δ R / R per 1 g of acceleration. (paper)

  4. Dynamic metasurface lens based on MEMS technology

    Science.gov (United States)

    Roy, Tapashree; Zhang, Shuyan; Jung, Il Woong; Troccoli, Mariano; Capasso, Federico; Lopez, Daniel

    2018-02-01

    In the recent years, metasurfaces, being flat and lightweight, have been designed to replace bulky optical components with various functions. We demonstrate a monolithic Micro-Electro-Mechanical System (MEMS) integrated with a metasurface-based flat lens that focuses light in the mid-infrared spectrum. A two-dimensional scanning MEMS platform controls the angle of the lens along two orthogonal axes by ±9°, thus enabling dynamic beam steering. The device could be used to compensate for off-axis incident light and thus correct for aberrations such as coma. We show that for low angular displacements, the integrated lens-on-MEMS system does not affect the mechanical performance of the MEMS actuators and preserves the focused beam profile as well as the measured full width at half maximum. We envision a new class of flat optical devices with active control provided by the combination of metasurfaces and MEMS for a wide range of applications, such as miniaturized MEMS-based microscope systems, LIDAR scanners, and projection systems.

  5. Fast prototyping of conducting polymer microelectrodes using resistance-controlled high precision drilling

    DEFF Research Database (Denmark)

    Kafka, Jan Robert; Geschke, Oliver; Skaarup, Steen

    2011-01-01

    We present a straightforward method for fast prototyping of microelectrode arrays in the highly conductive polymer poly(3,4-ethylenedioxythiophene) (PEDOT). Microelectrode arrays were produced by electrical resistance-controlled microdrilling through an insulating polymer layer (TOPAS® 5013......) covering a PEDOT layer. The sudden drop in electrical resistance between the metal drill and the PEDOT layer upon physical contact was employed as stop criterion for the drilling process. Arrays of 3×3 microelectrodes of diameter 30μm or 100μm, respectively, and having center-to-center electrode spacings...... approach the steady state currents predicted from modeling, but at a much slower rate than expected. This is shown to be caused by the use of electroactive PEDOT electrodes. Subtraction of the latter contribution gives approach to steady state currents within a few seconds, which is in very good agreement...

  6. Chronic microelectrode investigations of normal human brain physiology using a hybrid depth electrode.

    Science.gov (United States)

    Howard, M A; Volkov, I O; Noh, M D; Granner, M A; Mirsky, R; Garell, P C

    1997-01-01

    Neurosurgeons have unique access to in vivo human brain tissue, and in the course of clinical treatment important scientific advances have been made that further our understanding of normal brain physiology. In the modern era, microelectrode recordings have been used to systematically investigate the cellular properties of lateral temporal cerebral cortex. The current report describes a hybrid depth electrode (HDE) recording technique that was developed to enable neurosurgeons to simultaneously investigate normal cellular physiology during chronic intracranial EEG recordings. The HDE combines microelectrode and EEG recordings sites on a single shaft. Multiple microelectrode recordings are obtained from MRI defined brain sites and single-unit activity is discriminated from these data. To date, over 60 HDEs have been placed in 20 epilepsy surgery patients. Unique physiologic data have been gathered from neurons in numerous brain regions, including amygdala, hippocampus, frontal lobe, insula and Heschl's gyrus. Functional activation studies were carried out without risking patient safety or comfort.

  7. Micro-electrode flux estimation confirms that the Solanum pimpinellifolium cu3 mutant still responds to systemin

    NARCIS (Netherlands)

    Lanfermeijer, Frank C.; Staal, Marten; Malinowski, Robert; Stratmann, Johannes W.; Elzenga, J. Theo M.

    In this study, we introduce the Micro-Electrode Ion Flux Estimation technique as a sensitive and accurate technique to study systemin-induced changes in ion fluxes from isolated nearly intact plant tissues. Our results demonstrate the effectiveness and value of the Micro-Electrode Ion Flux

  8. Rapid Voltammetric Measurements at Conducting Polymer Microelectrodes Using Ultralow-Capacitance Poly(3,4-ethylenedioxythiophene):Tosylate

    DEFF Research Database (Denmark)

    Meier, Adam R.; Matteucci, Marco; Vreeland, Richard F.

    2016-01-01

    :tOsylate microelectrodes and were used to perform fast-scan cyclic voltammetry (FSCV) measurements. Using a scan rate of 100 V/s, we measured ferrocene carboxylic acid and dopamine by FSCV. In contrast to carbon-fiber microelectrodes, the reduction peak showed higher sensitivity when compared to the oxidation peak...

  9. Correlations between histology and neuronal activity recorded by microelectrodes implanted chronically in the cerebral cortex

    Science.gov (United States)

    McCreery, Douglas; Cogan, Stuart; Kane, Sheryl; Pikov, Victor

    2016-06-01

    Objective. To quantify relations between the neuronal activity recorded with chronically-implanted intracortical microelectrodes and the histology of the surrounding tissue, using radial distance from the tip sites and time after array implantation as parameters. Approach. ‘Utah’-type intracortical microelectrode arrays were implanted into cats’ sensorimotor cortex for 275-364 days. The brain tissue around the implants was immuno-stained for the neuronal marker NeuN and for the astrocyte marker GFAP. Pearson’s product-moment correlations were used to quantify the relations between these markers and the amplitudes of the recorded neuronal action potentials (APs) and their signal-to-noise ratios (S/N). Main results. S/N was more stable over post-implant time than was AP amplitude, but its increased correlation with neuronal density after many months indicates ongoing loss of neurons around the microelectrodes. S/N was correlated with neuron density out to at least 140 μm from the microelectrodes, while AP amplitude was correlated with neuron density and GFAP density within ˜80 μm. Correlations between AP amplitude and histology markers (GFAP and NeuN density) were strongest immediately after implantation, while correlation between the neuron density and S/N was strongest near the time the animals were sacrificed. Unlike AP amplitude, there was no significant correlation between S/N and density of GFAP around the tip sites. Significance. Our findings indicate an evolving interaction between changes in the tissue surrounding the microelectrodes and the microelectrode’s electrical properties. Ongoing loss of neurons around recording microelectrodes, and the interactions between their delayed electrical deterioration and early tissue scarring around the tips appear to pose the greatest threats to the microelectrodes’ long-term functionality.

  10. MEMS-BASED OSCILLATORS: A REVIEW

    Directory of Open Access Journals (Sweden)

    Jamilah Karim

    2014-05-01

    Full Text Available ABSTRACT: This paper presents an overview of microelectromechanical (MEMS based oscillators. The accuracy and stability of the reference frequency will normally limit the performance of most wireless communication systems. MEMS technology is the technology of choice due to its compatibility to silicon, leading to integration with circuits and lowering power consumption. MEMS based oscillators also provide the potential of a fully integrated transceiver. The most commonly used topology for MEMS based oscillators are pierce oscillator circuit topology and TIA circuit topology. Both topologies result in very competitive output in terms of phase noise and power consumption.  They can be used for either higher or lower Rx. The major difference between both topologies is the number of transistors used. TIA circuit used more number of transistor compare to pierce circuit. Thus design complexity of the TIA is higher. Pierce circuit is simpler, provide straightforward biasing and easier to design. The highly integratable of MEMS-based oscillators have made them much needed in future multiband wireless system. So that future wireless systems are able to function globally without any problem. ABSTRAK: Kertas kerja ini membentangkan gambaran keseluruhan mikroelektromekanikal (MEMS berdasarkan pengayun.  Ketepatan dan kestabilan frekuensi rujukan sering membataskan perlaksanaan kebanyakan sistem komunikasi tanpa wayar. Teknologi MEMS merupakan teknologi pilihan memandangkan ia serasi dengan silikon; membolehkan integrasi dengan litar dan penggunaan tenaga yang rendah.  Pengayun berdasarkan MEMS juga  berpotensi sebagai integrasi penuh penghantar-terima. Topologi yang sering digunakan untuk pengayun berdasarkan MEMS adalah topologi litar pengayun pencantas dan topologi litar TIA.  Keputusan bagi kedua-dua topologi adalah amat kompetitif dari segi fasa bunyi dan penggunaan tenaga. Ia boleh digunakan untuk meninggikan atau merendahkan Rx. Perbezaan utama

  11. Status of the MEMS Industry: Evolution or MEMS Markets and of the Industrial Infrastructure

    Directory of Open Access Journals (Sweden)

    J. C. ELOY

    2007-12-01

    Full Text Available The MEMS markets in 2006 reached US$ 5.8 B and we can estimate that the 2011 MEMS markets will reach more than US $ 10.7 B, with very diverse growth rate depending on the devices and the applications: silicon microphone and RF MEMS are the fastest growing applications but the existing applications like ink jet head and pressure sensors are still growing at a rate of 4 % per year at least. The industrial infrastructure is changing, with more and more companies going to 8’’ manufacturing facilities and the strong growth of the MEMS foundry business. MEMS business is changing for more structured industry and high volume production.

  12. Microelectrode for energy and current control of nanotip field electron emitters

    International Nuclear Information System (INIS)

    Lüneburg, S.; Müller, M.; Paarmann, A.; Ernstorfer, R.

    2013-01-01

    Emerging experiments and applications in electron microscopy, holography, and diffraction benefit from miniaturized electron guns for compact experimental setups. We present a highly compact microelectrode integrated field emitter that consists of a tungsten nanotip coated with a few micrometers thick polyimide film followed by a several nanometers thick gold film, both positioned behind the exposed emitter apex by approximately 10–30 μm. The control of the electric field strength at the nanometer scale tip apex allows suppression, extraction, and energy tuning of field-emitted electrons. The performance of the microelectrode is demonstrated experimentally and supported by numerical simulations

  13. Strain response of stretchable micro-electrodes: Controlling sensitivity with serpentine designs and encapsulation

    International Nuclear Information System (INIS)

    Gutruf, Philipp; Walia, Sumeet; Nur Ali, Md; Sriram, Sharath; Bhaskaran, Madhu

    2014-01-01

    The functionality of flexible electronics relies on stable performance of thin film micro-electrodes. This letter investigates the behavior of gold thin films on polyimide, a prevalent combination in flexible devices. The dynamic behavior of gold micro-electrodes has been studied by subjecting them to stress while monitoring their resistance in situ. The shape of the electrodes was systematically varied to examine resistive strain sensitivity, while an additional encapsulation was applied to characterize multilayer behavior. The realized designs show remarkable tolerance to repetitive strain, demonstrating that curvature and encapsulation are excellent approaches for minimizing resistive strain sensitivity to enable durable flexible electronics

  14. Effects of the partially movable control fin with end plate of underwater vehicle

    Directory of Open Access Journals (Sweden)

    Chul-Min Jung

    2017-01-01

    Full Text Available Underwater torpedo has control fin with very low aspect ratio due to launching from limited size of cylindrical torpedo tube. If the aspect ratio of control fin of underwater vehicle is very low three-dimensional flow around control fin largely reduces control forces. In this study, the end plate was applied to reduce the three-dimensional flow effects of partially movable control fin of underwater vehicle. Through numerical simulations the flow field around control fin was examined with and without end plate for different flap angles. The pressure, vorticity, lift and torque on the control fin were analyzed and compared to experiments. The comparison have shown a reasonable agreement between numerical and experimental results and the effect of end plate on a low aspect ratio control fin. When the end plate was attached to the movable control fin, the lift increased and the actuator shaft torque did not significantly change. As this means less consumption of the actuator shaft torque compared to the control fin that has the same control force, the inner actuator capacity can be reduced and energy consumption can be saved. Considering this, it is expected to be effectively applied to the control fin design of underwater vehicles such as torpedoes.

  15. Adjustable control station with movable monitors and cameras for viewing systems in robotics and teleoperations

    Science.gov (United States)

    Diner, Daniel B. (Inventor)

    1994-01-01

    Real-time video presentations are provided in the field of operator-supervised automation and teleoperation, particularly in control stations having movable cameras for optimal viewing of a region of interest in robotics and teleoperations for performing different types of tasks. Movable monitors to match the corresponding camera orientations (pan, tilt, and roll) are provided in order to match the coordinate systems of all the monitors to the operator internal coordinate system. Automated control of the arrangement of cameras and monitors, and of the configuration of system parameters, is provided for optimal viewing and performance of each type of task for each operator since operators have different individual characteristics. The optimal viewing arrangement and system parameter configuration is determined and stored for each operator in performing each of many types of tasks in order to aid the automation of setting up optimal arrangements and configurations for successive tasks in real time. Factors in determining what is optimal include the operator's ability to use hand-controllers for each type of task. Robot joint locations, forces and torques are used, as well as the operator's identity, to identify the current type of task being performed in order to call up a stored optimal viewing arrangement and system parameter configuration.

  16. Sputtered Encapsulation as Wafer Level Packaging for Isolatable MEMS Devices: A Technique Demonstrated on a Capacitive Accelerometer

    Directory of Open Access Journals (Sweden)

    Azrul Azlan Hamzah

    2008-11-01

    Full Text Available This paper discusses sputtered silicon encapsulation as a wafer level packaging approach for isolatable MEMS devices. Devices such as accelerometers, RF switches, inductors, and filters that do not require interaction with the surroundings to function, could thus be fully encapsulated at the wafer level after fabrication. A MEMSTech 50g capacitive accelerometer was used to demonstrate a sputtered encapsulation technique. Encapsulation with a very uniform surface profile was achieved using spin-on glass (SOG as a sacrificial layer, SU-8 as base layer, RF sputtered silicon as main structural layer, eutectic gold-silicon as seal layer, and liquid crystal polymer (LCP as outer encapsulant layer. SEM inspection and capacitance test indicated that the movable elements were released after encapsulation. Nanoindentation test confirmed that the encapsulated device is sufficiently robust to withstand a transfer molding process. Thus, an encapsulation technique that is robust, CMOS compatible, and economical has been successfully developed for packaging isolatable MEMS devices at the wafer level.

  17. Laboratory and Field Test of Movable Conduction-Cooled High-Temperature SMES for Power System Stability Enhancement

    DEFF Research Database (Denmark)

    Fang, Jiakun; Wen, J.; Wang, S.

    2013-01-01

    ’ effectiveness on improvements of system voltage stability and on the oscillation damping. Test results indicate that the SMES system has the features of fast response and four-quadrant power operation. The accessories for the movability of the SEMS system are well designed. The system is feasible to be used...... in power systems.......This paper introduces the first movable conduction-cooled high temperature superconducting magnetic energy storage (SMES) system developed in China. The SMES is rated at 380 V / 35 kJ / 7 kW, consisting of the high temperature magnet confined in a dewar, the cryogenic unit, the converter...

  18. Mid infrared MEMS FTIR spectrometer

    Science.gov (United States)

    Erfan, Mazen; Sabry, Yasser M.; Mortada, Bassem; Sharaf, Khaled; Khalil, Diaa

    2016-03-01

    In this work we report, for the first time to the best of our knowledge, a bulk-micromachined wideband MEMS-based spectrometer covering both the NIR and the MIR ranges and working from 1200 nm to 4800 nm. The core engine of the spectrometer is a scanning Michelson interferometer micro-fabricated using deep reactive ion etching (DRIE) technology. The spectrum is obtained using the Fourier Transform techniques that allows covering a very wide spectral range limited by the detector responsivity. The moving mirror of the interferometer is driven by a relatively large stroke electrostatic comb-drive actuator. Zirconium fluoride (ZrF4) multimode optical fibers are used to connect light between the white light source and the interferometer input, as well as the interferometer output to a PbSe photoconductive detector. The recorded signal-to-noise ratio is 25 dB at the wavelength of 3350 nm. The spectrometer is successfully used in measuring the absorption spectra of methylene chloride, quartz glass and polystyrene film. The presented solution provides a low cost method for producing miniaturized spectrometers in the near-/mid-infrared.

  19. Highly elastic conductive polymeric MEMS

    Science.gov (United States)

    Ruhhammer, J.; Zens, M.; Goldschmidtboeing, F.; Seifert, A.; Woias, P.

    2015-02-01

    Polymeric structures with integrated, functional microelectrical mechanical systems (MEMS) elements are increasingly important in various applications such as biomedical systems or wearable smart devices. These applications require highly flexible and elastic polymers with good conductivity, which can be embedded into a matrix that undergoes large deformations. Conductive polydimethylsiloxane (PDMS) is a suitable candidate but is still challenging to fabricate. Conductivity is achieved by filling a nonconductive PDMS matrix with conductive particles. In this work, we present an approach that uses new mixing techniques to fabricate conductive PDMS with different fillers such as carbon black, silver particles, and multiwalled carbon nanotubes. Additionally, the electrical properties of all three composites are examined under continuous mechanical stress. Furthermore, we present a novel, low-cost, simple three-step molding process that transfers a micro patterned silicon master into a polystyrene (PS) polytetrafluoroethylene (PTFE) replica with improved release features. This PS/PTFE mold is used for subsequent structuring of conductive PDMS with high accuracy. The non sticking characteristics enable the fabrication of delicate structures using a very soft PDMS, which is usually hard to release from conventional molds. Moreover, the process can also be applied to polyurethanes and various other material combinations.

  20. Automotive Sensors and MEMS Technology

    Science.gov (United States)

    Nonomura, Yutaka

    - Automotive sensors are used for emission gas purification, energy conservation, car kinematic performance, safety and ITS (intelligent transportation system). The comparison of the sensor characteristics was made for their application area. Many kinds of the principles are applied for the sensors. There are two types of sensors, such as physical and chemical one. Many of the automotive sensors are physical type such as mechanical sensors. And a gas sensor is a chemical type. The sensors have been remarkably developed with the advancement of the MEMS (Micro Electro Mechanical Systems) technology. In this paper, gas, pressure, combustion pressure, acceleration, magnetic, and angular rate sensors for automotive use are explained with their features. The sensors are key devices to control cars in the engine, power train, chassis and safety systems. The environment resistance, long term reliability, and low cost are required for the automotive sensors. They are very hard to be resolved. However, the sensor technology contributes greatly to improving global environment, energy conservation, and safety. The applications of automotive sensors will be expanded with the automobile developments.

  1. Mechanical performance of SiC based MEMS capacitive microphone for ultrasonic detection in harsh environment

    Science.gov (United States)

    Zawawi, S. A.; Hamzah, A. A.; Mohd-Yasin, F.; Majlis, B. Y.

    2017-08-01

    In this project, SiC based MEMS capacitive microphone was developed for detecting leaked gas in extremely harsh environment such as coal mines and petroleum processing plants via ultrasonic detection. The MEMS capacitive microphone consists of two parallel plates; top plate (movable diaphragm) and bottom (fixed) plate, which separated by an air gap. While, the vent holes were fabricated on the back plate to release trapped air and reduce damping. In order to withstand high temperature and pressure, a 1.0 μm thick SiC diaphragm was utilized as the top membrane. The developed SiC could withstand a temperature up to 1400°C. Moreover, the 3 μm air gap is invented between the top membrane and the bottom plate via wafer bonding. COMSOL Multiphysics simulation software was used for design optimization. Various diaphragms with sizes of 600 μm2, 700 μm2, 800 μm2, 900 μm2 and 1000 μm2 are loaded with external pressure. From this analysis, it was observed that SiC microphone with diaphragm width of 1000 μm2 produced optimal surface vibrations, with first-mode resonant frequency of approximately 36 kHz. The maximum deflection value at resonant frequency is less than the air gap thickness of 8 mu;m, thus eliminating the possibility of shortage between plates during operation. As summary, the designed SiC capacitive microphone has high potential and it is suitable to be applied in ultrasonic gas leaking detection in harsh environment.

  2. A Nuclear Microbattery for MEMS Devices

    International Nuclear Information System (INIS)

    Blanchard, James; Henderson, Douglass; Lal, Amit

    2002-01-01

    This project was designed to demonstrate the feasibility of producing on-board power for MEMS devices using radioisotopes. MEMS is a fast growing field, with hopes for producing a wide variety of revolutionary applications, including ''labs on a chip,'' micromachined scanning tunneling microscopes, microscopic detectors for biological agents, microsystems for DNA identification, etc. Currently, these applications are limited by the lack of an on-board power source. Research is ongoing to study approaches such as fuel cells, fossil fuels, and chemical batteries, but all these concepts have limitations. For long-lived, high energy density applications, on-board radioisotope power offers the best choice. We have succeeded in producing such devices using a variety of isotopes, incorporation methods, and device geometries. These experiments have demonstrated the feasibility of using radioisotope power and that there are a variety of options available for MEMS designers. As an example of an integrated, self-powered application, we have created an oscillating cantilever beam that is capable of consistent, periodic oscillations over very long time periods without the need for refueling. Ongoing work will demonstrate that this cantilever is capable of radio frequency transmission, allowing MEMS devices to communicate with one another wirelessly. Thus, this will be the first self-powered wireless transmitter available for use in MEMS devices, permitting such applications as sensors embedded in buildings for continuous monitoring of the building performance and integrity

  3. Impedance measurements on Au microelectrodes using controlled atmosphere high temperature scanning probe microscope

    DEFF Research Database (Denmark)

    Wu, Yuehua; Hansen, Karin Vels; Jacobsen, Torben

    2011-01-01

    High temperature impedance measurements on Au microelectrodes deposited on polished yttria stabilized zirconia (YSZ) pellets were demonstrated using a newly designed controlled atmosphere high temperature scanning probe microscope (CAHT-SPM). Probes based on Pt0.8Ir0.2 were fabricated and employed...

  4. All-diamond functional surface micro-electrode arrays for brain-slice neural analysis

    Czech Academy of Sciences Publication Activity Database

    Vahidpour, F.; Curley, L.; Biró, I.; McDonald, M.; Croux, D.; Pobedinskas, P.; Haenen, K.; Giugliano, M.; Vlčková Živcová, Zuzana; Kavan, Ladislav; Nesládek, M.

    2017-01-01

    Roč. 214, č. 2 (2017), č. článku 1532347. ISSN 1862-6300 R&D Projects: GA ČR GA13-31783S Institutional support: RVO:61388955 Keywords : impedance spectroscopy * microelectrode arrays * surface termination Subject RIV: CG - Electrochemistry OBOR OECD: Electrochemistry (dry cells, batteries, fuel cells, corrosion metals, electrolysis) Impact factor: 1.775, year: 2016

  5. Selective wetting-induced micro-electrode patterning for flexible micro-supercapacitors.

    Science.gov (United States)

    Kim, Sung-Kon; Koo, Hyung-Jun; Lee, Aeri; Braun, Paul V

    2014-08-13

    Selective wetting-induced micro-electrode patterning is used to fabricate flexible micro-supercapacitors (mSCs). The resulting mSCs exhibit high performance, mechanical stability, stable cycle life, and hold great promise for facile integration into flexible devices requiring on-chip energy storage. © 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

  6. Effects of Organophosphorus Flame Retardants on Spontaneous Activity in Neuronal Networks Grown on Microelectrode Arrays

    Science.gov (United States)

    EFFECTS OF ORGANOPHOSPHORUS FLAME RETARDANTS ON SPONTANEOUS ACTIVITY IN NEURONAL NETWORKS GROWN ON MICROELECTRODE ARRAYS TJ Shafer1, K Wallace1, WR Mundy1, M Behl2,. 1Integrated Systems Toxicology Division, NHEERL, USEPA, RTP, NC, USA, 2National Toxicology Program, NIEHS, RTP, NC...

  7. Performance Improvement by Layout Designs of Conductive Polymer Microelectrode Based Impedimetric Biosensors

    DEFF Research Database (Denmark)

    Rosati, Giulio; Daprà, Johannes; Cherré, Solène

    2014-01-01

    In this work we present a theoretical, computational, and experimental evaluation of the performance of an impedimetric biosensor based on interdigitated conductive polymer (PEDOT:TsO) microelectrodes in a microfluidic system. The influence of the geometry of the electrodes and microchannels on t...

  8. Sensing oxygen at the millisecond time-scale using an ultra-microelectrode array (UMEA)

    NARCIS (Netherlands)

    van Rossem, F.; Bomer, Johan G.; de Boer, Hans L.; Abbas, Yawar; de Weerd, Eddy; van den Berg, Albert; Le Gac, Séverine

    2017-01-01

    We report a novel sensing protocol based on ultra-short (< 5 ms) measurements, which is using a dedicated sensor consisting of an ultra-microelectrode array (UMEA) for monitoring the concentration in dissolved oxygen concentrations in solution. The UMEA sensor is fabricated from Pt and

  9. Geometry based finite element modeling of the electrical contact between a cultured neuron and a microelectrode

    NARCIS (Netherlands)

    Buitenweg, Jan R.; Rutten, Wim; Marani, Enrico

    2003-01-01

    The electrical contact between a substrate embedded microelectrode and a cultured neuron depends on the geometry of the neuron-electrode interface. Interpretation and improvement of these contacts requires proper modeling of all coupling mechanisms. In literature, it is common practice to model the

  10. Modeled channel distributions explain extracellular recordings from cultured neurons sealed to microelectrodes

    NARCIS (Netherlands)

    Buitenweg, Jan R.; Rutten, Wim; Marani, Enrico

    2002-01-01

    Amplitudes and shapes of extracellular recordings from single neurons cultured on a substrate embedded microelectrode depend not only on the volume conducting properties of the neuron-electrode interface, but might also depend on the distribution of voltage-sensitive channels over the neuronal

  11. Characterization of poly(3,4-ethylenedioxythiophene):tosylate conductive polymer microelectrodes for transmitter detection

    DEFF Research Database (Denmark)

    Larsen, Simon T.; Vreeland, Richard F.; Heien, Michael L.

    2012-01-01

    In this paper we investigate the physical and electrochemical properties of micropatterned poly(3,4-ethylenedioxythiophene):tosylate (PEDOT:tosylate) microelectrodes for neurochemical detection. PEDOT:tosylate is a promising conductive polymer electrode material for chip-based bioanalytical...

  12. Investigation of parameters controlling the dielectrophoretic assembly of carbon nanotubes on microelectrodes

    DEFF Research Database (Denmark)

    Dimaki, Maria; Bøggild, Peter

    2008-01-01

    Networks of single-walled carbon nanotubes were assembled onto microelectrodes by dielectrophoresis. The dependence of the obtained networks on several assembly parameters such as bias voltage, field application time, frequency, electrode geometry and the nanotube solvent were investigated both s...

  13. IC-Compatible Technologies for Optical MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Krygowski, T.W.; Sniegowski, J.J.

    1999-04-30

    Optical Micro Electro Mechanical Systems (Optical MEMS) Technology holds the promise of one-day producing highly integrated optical systems on a common, monolithic substrate. The choice of fabrication technology used to manufacture Optical MEMS will play a pivotal role in the size, functionality and ultimately the cost of optical Microsystems. By leveraging the technology base developed for silicon integrated circuits, large batches of routers, emitters, detectors and amplifiers will soon be fabricated for literally pennies per part. In this article we review the current status of technologies used for Optical MEMS, as well as fabrication technologies of the future, emphasizing manufacturable surface micromachining approaches to producing reliable, low-cost devices for optical communications applications.

  14. MEMS tunable grating micro-spectrometer

    Science.gov (United States)

    Tormen, Maurizio; Lockhart, R.; Niedermann, P.; Overstolz, T.; Hoogerwerf, A.; Mayor, J.-M.; Pierer, J.; Bosshard, C.; Ischer, R.; Voirin, G.; Stanley, R. P.

    2017-11-01

    The interest in MEMS based Micro-Spectrometers is increasing due to their potential in terms of flexibility as well as cost, low mass, small volume and power savings. This interest, especially in the Near-Infrared and Mid- Infrared, ranges from planetary exploration missions to astronomy, e.g. the search for extra solar planets, as well as to many other terrestrial fields of application such as, industrial quality and surface control, chemical analysis of soil and water, detection of chemical pollutants, exhausted gas analysis, food quality control, process control in pharmaceuticals, to name a few. A compact MEMS-based Spectrometer for Near- Infrared and Mid-InfraRed operation have been conceived, designed and demonstrated. The design based on tunable MEMS blazed grating, developed in the past at CSEM [1], achieves state of the art results in terms of spectral resolution, operational wavelength range, light throughput, overall dimensions, and power consumption.

  15. Vortex Anemometer Using MEMS Cantilever Sensor

    CERN Document Server

    Zylka, P; Zylka, Pawel; Modrzynski, Pawel

    2010-01-01

    This paper presents construction and performance of a novel hybrid microelectromechanical system (MEMS) vortex flowmeter. A miniature cantilever MEMS displacement sensor was used to detect frequency of vortices development. 3-mm-long silicon cantilever, protruding directly out of a trailing edge of a trapezoidal glass-epoxy composite bluff body was put into oscillatory motion by vortices shed alternately from side surfaces of the obstacle. Verified linearmeasurement range of the device extended from 5 to 22 m/s; however, it could be broadened in absence of external 50-Hz mains electrical interfering signal which required bandpass frequency-domain digital sensor signal processing. The MEMS vortex sensor proved its effectiveness in detection of semilaminar airflow velocity distribution in a 40-mm-diameter tubular pipe.

  16. 3D simulation of friction stir welding based on movable cellular automaton method

    Science.gov (United States)

    Eremina, Galina M.

    2017-12-01

    The paper is devoted to a 3D computer simulation of the peculiarities of material flow taking place in friction stir welding (FSW). The simulation was performed by the movable cellular automaton (MCA) method, which is a representative of particle methods in mechanics. Commonly, the flow of material in FSW is simulated based on computational fluid mechanics, assuming the material as continuum and ignoring its structure. The MCA method considers a material as an ensemble of bonded particles. The rupture of interparticle bonds and the formation of new bonds enable simulations of crack nucleation and healing as well as mas mixing and microwelding. The simulation results showed that using pins of simple shape (cylinder, cone, and pyramid) without a shoulder results in small displacements of plasticized material in workpiece thickness directions. Nevertheless, the optimal ratio of longitudinal velocity to rotational speed makes it possible to transport the welded material around the pin several times and to produce a joint of good quality.

  17. An efficient, movable single-particle detector for use in cryogenic ultra-high vacuum environments.

    Science.gov (United States)

    Spruck, Kaija; Becker, Arno; Fellenberger, Florian; Grieser, Manfred; von Hahn, Robert; Klinkhamer, Vincent; Novotný, Oldřich; Schippers, Stefan; Vogel, Stephen; Wolf, Andreas; Krantz, Claude

    2015-02-01

    A compact, highly efficient single-particle counting detector for ions of keV/u kinetic energy, movable by a long-stroke mechanical translation stage, has been developed at the Max-Planck-Institut für Kernphysik (Max Planck Institute for Nuclear Physics, MPIK). Both, detector and translation mechanics, can operate at ambient temperatures down to ∼10 K and consist fully of ultra-high vacuum compatible, high-temperature bakeable, and non-magnetic materials. The set-up is designed to meet the technical demands of MPIK's Cryogenic Storage Ring. We present a series of functional tests that demonstrate full suitability for this application and characterise the set-up with regard to its particle detection efficiency.

  18. Delay time in a single barrier for a movable quantum shutter

    International Nuclear Information System (INIS)

    Hernandez, Alberto

    2010-01-01

    The transient solution and delay time for a δ potential scatterer with a movable quantum shutter is calculated by solving analytically the time-dependent Schroedinger equation. The delay time is analyzed as a function of the distance between the shutter and the potential barrier and also as a function of the distance between the potential barrier and the detector. In both cases, it is found that the delay time exhibits a dynamical behavior and that it tends to a saturation value Δt sat in the limit of very short distances, which represents the maximum delay produced by the potential barrier near the interaction region. The phase time τ θ , on the other hand, is not an appropriate time scale for measuring the time delay near the interaction region, except if the shutter is moved far away from the potential. The role played by the antibound state of the system on the behavior of the delay time is also discussed.

  19. High magnetic field uniformity superconducting magnet for a movable polarized target

    International Nuclear Information System (INIS)

    Anishchenko, N.G.; Bartenev, V.D.; Blinov, N.A.

    1998-01-01

    The superconducting polarizing magnet was constructed for movable polarized target (MPT) with working volume 200 mm long and 30 mm in diameter. The magnet provides a polarizing magnetic field up to 6 T with the uniformity of 4.5 x 10 -4 in the working volume of the target. The magnet windings are made of a NbTi wire, impregnated with the epoxy resin and placed in the horizontal cryostat with 'warm' aperture diameter of 96 mm. The design and technology of the magnet winding are described. Results of the magnetic field map measurements using a NMR-magnetometer are given. The MPT set-up is installed in the beam line of polarized neutrons produced by break-up of polarized deuterons extracted from the Synchrophasotron of the Laboratory of High Energies (LHE), JINR, Dubna

  20. Crossed Czerny-Turner Spectrometer with Extended Spectrum Using Movable Planar Mirrors.

    Science.gov (United States)

    Sze, Jyh-Rou; Wei, An-Chi

    2018-01-01

    This study reports a crossed Czerny-Turner spectrometer with multiple mirrors to extend the inspected spectrum. A design example with two movable mirrors and a stationary planar mirror is experimentally demonstrated to offer two additional spectral bands, thereby leading to thrice the spectral range of the original Czerny-Turner spectrometer. The results indicate that the configurations to measure the three bands have almost identical parameters. The moving direction of the planar mirror and the plane of incidence are orthogonal; thus, the influence of mirror movement on the repeatability of the spectrum is minimized. In addition to the merits of cost-effectiveness and rapid inspection, the reported mechanism of mirror movement is applied to general spectrometers to extend the spectral coverage without sacrificing the resolution.

  1. APPROACHES FOR STABILIZING OF BIPED ROBOTS IN A STANDING POSITION ON MOVABLE SUPPORT

    Directory of Open Access Journals (Sweden)

    D. N. Bazylev

    2015-05-01

    Full Text Available Subject of research. The problem of stabilization for biped walking robots on the surface is considered. The angle and angular velocity of the movable surface varies randomly in a limited range. Methods. Two approaches of stabilization of biped robots are proposed. The first approach requires the construction of kinematic and dynamic models of the robot. Dynamic equations were obtained using the Euler-Lagrange method. The control algorithm is based on the method of inverse dynamics, in which the original nonlinear dynamic model is linearized by a feedback. The second stabilization algorithm uses only the kinematic model of the robot. A hybrid controller is developed for this approach. In the case of low angular velocities of the movable support the robot stabilization is performed by PD controller on the basis of the angle error of deflection of the servo shaft. In the case of relatively high angular velocities of the support the controller also uses the gyroscope readings mounted in the robot torso. Maintenance of the robot’s gravity center over the center of bearing area for providing a stable position was chosen as a goal of control in both approaches. Main results. Efficiency and effectiveness of the proposed approaches for stabilization of biped robots on the moving surface are demonstrated by the numerical simulation. Both methods provide stability of the balancing robots on changing the angle of inclination and angular velocity of the moving surface in the ranges (50; 50 and (40 / sec; 40 / sec , respectively. Comparative analysis of these approaches under identical requirements for quality indicators of transients is also provided: transient time 0.2 sec п t  and overshoot   0%. The conditions under which each of the control methods will be more effective in practice are identified.

  2. MEMS reliability: The challenge and the promise

    Energy Technology Data Exchange (ETDEWEB)

    Miller, W.M.; Tanner, D.M.; Miller, S.L.; Peterson, K.A.

    1998-05-01

    MicroElectroMechanical Systems (MEMS) that think, sense, act and communicate will open up a broad new array of cost effective solutions only if they prove to be sufficiently reliable. A valid reliability assessment of MEMS has three prerequisites: (1) statistical significance; (2) a technique for accelerating fundamental failure mechanisms, and (3) valid physical models to allow prediction of failures during actual use. These already exist for the microelectronics portion of such integrated systems. The challenge lies in the less well understood micromachine portions and its synergistic effects with microelectronics. This paper presents a methodology addressing these prerequisites and a description of the underlying physics of reliability for micromachines.

  3. Enabling technology for MEMS and nanodevices

    CERN Document Server

    Baltes, Henry; Fedder, Gary K; Hierold, Christofer; Korvink, Jan G; Tabata, Osamu

    2013-01-01

    This softcover edition of the eponymous volume from the successful ""Advanced Micro & Nanosystems"" series covers all aspects of fabrication of MEMS under CMOS-compatible conditions from design to implementation.It examines the various routes and methods to combine electronics generated by the CMOS technology with novel micromechanical parts into one-chip solutions. Various approaches, fundamental and technological aspects as well as strategies leading to different types of functionalities and presented in detail.For the practicing engineer as well as MSc and PhD students on MEMS cours

  4. Hermeticity testing of MEMS and microelectronic packages

    CERN Document Server

    Costello, Suzanne

    2013-01-01

    Packaging of microelectronics has been developing since the invention of the transistor in 1947. With the increasing complexity and decreasing size of the die, packaging requirements have continued to change. A step change in package requirements came with the introduction of the Micro-Electro-Mechanical System (MEMS) whereby interactions with the external environment are, in some cases, required.This resource is a rapid, definitive reference on hermetic packaging for the MEMS and microelectronics industry, giving practical guidance on traditional and newly developed test methods. This book in

  5. Liquid Tunable Microlenses based on MEMS techniques

    Science.gov (United States)

    Zeng, Xuefeng; Jiang, Hongrui

    2013-01-01

    The recent rapid development in microlens technology has provided many opportunities for miniaturized optical systems, and has found a wide range of applications. Of these microlenses, tunable-focus microlenses are of special interest as their focal lengths can be tuned using micro-scale actuators integrated with the lens structure. Realization of such tunable microlens generally relies on the microelectromechanical system (MEMS) technologies. Here, we review the recent progress in tunable liquid microlenses. The underlying physics relevant to these microlenses are first discussed, followed by description of three main categories of tunable microlenses involving MEMS techniques, mechanically driven, electrically driven, and those integrated within microfluidic systems. PMID:24163480

  6. RF MEMS theory, design, and technology

    CERN Document Server

    Rebeiz, Gabriel M

    2003-01-01

    Ultrasmall Radio Frequency and Micro-wave Microelectromechanical systems (RF MEMs), such as switches, varactors, and phase shifters, exhibit nearly zero power consumption or loss. For this reason, they are being developed intensively by corporations worldwide for use in telecommunications equipment. This book acquaints readers with the basics of RF MEMs and describes how to design practical circuits and devices with them. The author, an acknowledged expert in the field, presents a range of real-world applications and shares many valuable tricks of the trade.

  7. Numerical Simulation of a Novel Electroosmotic Micropump for Bio-MEMS Applications

    Directory of Open Access Journals (Sweden)

    Alireza Alishahi

    2014-12-01

    Full Text Available High lamination in microchannel is one of the main challenges in Lab-On-a-Chip’s components like micro total analyzer systems and any miniaturization of fluid channels intensify the viscose effects. In chip-scale, the electroosmotic flow is more efficient. Therefore, this study presents a MEMS-based low-voltage micropump for low-conductive biological samples and solutions, where twelve narrow miniaturized microchannels designed in one unit to efficiently using the electroosmotic effects which generated near the walls. Four microelectrodes are mounted in lateral sides of the microchannel and excited by low-voltage potential to generate pumping process inside the channel. We sweep the voltage amplitude and a linear variation of fluid velocity achieved by Finite-Element-Method (FEM simulation. We obtain a net average velocity of 0.1 mm/s; by applying 2 V and -2 V to the electrodes. Therefore, the proposed low-voltage design is able to pumping the low-conductive biofluids for conventional lab-on-a-chip applications.

  8. Review of Automated Design and Optimization of MEMS

    DEFF Research Database (Denmark)

    Achiche, Sofiane; Fan, Zhun; Bolognini, Francesca

    2007-01-01

    carried out. This paper presents a review of these techniques. The design task of MEMS is usually divided into four main stages: System Level, Device Level, Physical Level and the Process Level. The state of the art o automated MEMS design in each of these levels is investigated.......In recent years MEMS saw a very rapid development. Although many advances have been reached, due to the multiphysics nature of MEMS, their design is still a difficult task carried on mainly by hand calculation. In order to help to overtake such difficulties, attempts to automate MEMS design were...

  9. Yolk/Shell Colloidal Crystals Incorporating Movable Cores with Their Motion Controlled by an External Electric Field

    NARCIS (Netherlands)

    K., Watanabe,; H., Ishii,; Konno, M.; Imhof, A.; van Blaaderen, A.; Nagao, D.

    2016-01-01

    Yolk/shell particles composed of a submicrometer-sized movable core and a silica shell are promising building blocks for novel optical colloidal crystals, because the locations of cores in the shell compartment can be reversibly changed by using external stimuli. Two dimensional arrays of yolk/shell

  10. A Virtual Pivot Point MEMS Actuator with Externally Mounted Mirror: Design, Fabrication and Characterization

    Directory of Open Access Journals (Sweden)

    T. M. Fahim AMIN

    2014-12-01

    Full Text Available In this paper, the design, fabrication, and characterization of a virtual pivot point micro electromechanical systems (MEMS electrostatic actuator with externally mounted mirror is presented. The point of rotation of the movable arm of the actuator is distant from the physical actuator. This is a requirement for certain applications, such as an external cavity laser in Littman configuration. A maximum rotational radius of 5 mm from the virtual pivot point was achieved. A detailed analytical analysis for the displacement of the structure is presented. The dynamic characterization of the device with a finite element analysis simulation shows that the resonance frequency of the in-plane rotational mode is well separated from that of the out-of-plane bending mode, confirming high in-plane stability. The devices were fabricated on a silicon-on-insulator wafer with device layer thickness of 100 µm. Thin mirrors were fabricated by dicing a 100 µm thick silicon wafer. A resonance frequency of about 5.9 ´ 102 Hz for the maximum sized mounted mirror (1.7 mm ´ 100 µm ´ 1.0 mm was determined by optical characterization.

  11. Optically pumped 1550nm wavelength tunable MEMS VCSEL

    DEFF Research Database (Denmark)

    Sahoo, Hitesh Kumar; Ansbæk, Thor; Ottaviano, Luisa

    2016-01-01

    The paper presents the design and fabrication of an optically pumped 1550nm tunable MEMS VCSEL with anenclosed MEMS. The MEMS is defined in SOI and the active material, an InP wafer with quantum wells arebonded to the SOI and the last mirror is made from the deposition of dielectric materials. Th....... The design bringsin flexibility to fabricate MEMS VCSELs over a wider range of wavelengths. The paper discusses results fromthe simulations and bonding results from fabrication. The device will push the boundaries for wavelength sweepspeed and bandwidth.......The paper presents the design and fabrication of an optically pumped 1550nm tunable MEMS VCSEL with anenclosed MEMS. The MEMS is defined in SOI and the active material, an InP wafer with quantum wells arebonded to the SOI and the last mirror is made from the deposition of dielectric materials...

  12. A Widely-Accessible Distributed MEMS Processing Environment. The MEMS Exchange Program

    Science.gov (United States)

    2012-10-29

    steadily rising for several years, our revenue began to drop in 2009, we think mostly due to the bad economy. In years past we would normally see a...the MEMS Materials and Processing Handbook, editors R. Ghodssi and P. Lin, Springer Press, New York, 2011. [3] BioMEMS and Biomaterials for...Medical Applications Biomaterials Science: An Integrated Clinical and Engineering Approach, edited by Yitzhak Rosen and Noel Elman, CRC Press, Boca

  13. Characterization of dielectric charging in RF MEMS

    NARCIS (Netherlands)

    Herfst, R.W.; Huizing, H.G.A.; Steeneken, P.G.; Schmitz, Jurriaan

    2005-01-01

    Capacitive RF MEMS switches show great promise for use in wireless communication devices such as mobile phones, but the successful application of these switches is hindered by the reliability of the devices: charge injection in the dielectric layer (SiN) can cause irreversible stiction of the moving

  14. Characterization of piezoelectric polymer composites for MEMS ...

    Indian Academy of Sciences (India)

    Abstract. Composite piezoelectric ceramics are important materials for transducer applications in medical diag- nostic devices and MEMS devices. In micrometer scale the material properties of piezopolymers or piezoceramics do not coincide with that of bulk materials. The present work is aimed at simulating the material ...

  15. From MEMS to NEMS : Scaling Cantilever Sensors

    NARCIS (Netherlands)

    Yang, C.K.

    2012-01-01

    This thesis studies the effects of scaling on the characterisation and readout of micro-electro mechanical systems (MEMS) to nano-electro mechanical systems (NEMS). In particular it focuses on cantilever, which is a basic device building block and an important transducer in many sensing

  16. Bullet Design of MEMS Cantilever - Hand Calculation

    Directory of Open Access Journals (Sweden)

    Abhijeet V. KSHIRSAGAR

    2008-04-01

    Full Text Available The present article describes the basic hand calculations for design of MEMS cantilever for beginners. The MATLAB software code was written to analysis the all formulae. Further the article gives insight of important parameters, its dependence and consideration for a good design.

  17. Fractal Structures For Mems Variable Capacitors

    KAUST Repository

    Elshurafa, Amro M.

    2014-08-28

    In accordance with the present disclosure, one embodiment of a fractal variable capacitor comprises a capacitor body in a microelectromechanical system (MEMS) structure, wherein the capacitor body has an upper first metal plate with a fractal shape separated by a vertical distance from a lower first metal plate with a complementary fractal shape; and a substrate above which the capacitor body is suspended.

  18. Novel RF-MEMS capacitive switching structures

    NARCIS (Netherlands)

    Rottenberg, X.; Jansen, Henricus V.; Fiorini, P.; De Raedt, W.; Tilmans, H.A.C.

    2002-01-01

    This paper reports on novel RF-MEMS capacitive switching devices implementing an electrically floating metal layer covering the dielectric to ensure intimate contact with the bridge in the down state. This results in an optimal switch down capacitance and allows optimisation of the down/up

  19. Review on the Modeling of Electrostatic MEMS

    Science.gov (United States)

    Chuang, Wan-Chun; Lee, Hsin-Li; Chang, Pei-Zen; Hu, Yuh-Chung

    2010-01-01

    Electrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduces the physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices. PMID:22219707

  20. MEMS Piezoresistive Pressure Sensor: A Survey

    OpenAIRE

    Shwetha Meti; Kirankumar B. Balavald; B. G. Sheeparmatti

    2016-01-01

    Piezoresistive pressure sensors are one of the very first products of MEMS technology, and are used in various fields like automotive industries, aerospace, biomedical applications, and household appliances. Amongst various transduction principles of pressure sensor piezoresistive transduction mechanism is widely used. Over a decade therehas been tremendous improvement in the development of the design of piezoresistive pressure sensor starting with the invention of piezoresistance...

  1. SiC MEMS For Harsh Environments

    National Research Council Canada - National Science Library

    Bradley, Kenneth

    2003-01-01

    This document is the final technical report for the SiC MEMS for Harsh Environments in-house research program jointly coordinated between AFRL/MNMF and AFRL/MLPS, and addresses the benefits of silicon carbide (SiC...

  2. MEMS deformable mirror CubeSat testbed

    Science.gov (United States)

    Cahoy, Kerri L.; Marinan, Anne D.; Novak, Benjamin; Kerr, Caitlin; Nguyen, Tam; Webber, Matthew; Falkenburg, Grant; Barg, Andrew; Berry, Kristen; Carlton, Ashley; Belikov, Ruslan; Bendek, Eduardo A.

    2013-09-01

    To meet the high contrast requirement of 1 × 10-10to image an Earth-like planet around a Sun-like star, space telescopes equipped with coronagraphs require wavefront control systems. Deformable mirrors are a key element of these systems that correct for optical imperfections, thermal distortions, and diffraction that would otherwise corrupt the wavefront and ruin the contrast. However, high-actuator-count MEMS deformable mirrors have yet to fly in space long enough to characterize their on-orbit performance and reduce risk by developing and operating their supporting systems. The goal of the MEMS Deformable Mirror CubeSat Testbed is to develop a CubeSat-scale demonstration of MEMS deformable mirror and wavefront sensing technology. In this paper, we consider two approaches for a MEMS deformable mirror technology demonstration payload that will fit within the mass, power, and volume constraints of a CubeSat: 1) a Michelson interferometer and 2) a Shack-Hartmann wavefront sensor. We clarify the constraints on the payload based on the resources required for supporting CubeSat subsystems drawn from subsystems that we have developed for a different CubeSat flight project. We discuss results from payload lab prototypes and their utility in defining mission requirements.

  3. MEMS Actuators for Improved Performance and Durability

    Science.gov (United States)

    Yearsley, James M.

    Micro-ElectroMechanical Systems (MEMS) devices take advantage of force-scaling at length scales smaller than a millimeter to sense and interact with directly with phenomena and targets at the microscale. MEMS sensors found in everyday devices like cell-phones and cars include accelerometers, gyros, pressure sensors, and magnetic sensors. MEMS actuators generally serve more application specific roles including micro- and nano-tweezers used for single cell manipulation, optical switching and alignment components, and micro combustion engines for high energy density power generation. MEMS rotary motors are actuators that translate an electric drive signal into rotational motion and can serve as rate calibration inputs for gyros, stages for optical components, mixing devices for micro-fluidics, etc. Existing rotary micromotors suffer from friction and wear issues that affect lifetime and performance. Attempts to alleviate friction effects include surface treatment, magnetic and electrostatic levitation, pressurized gas bearings, and micro-ball bearings. The present work demonstrates a droplet based liquid bearing supporting a rotary micromotor that improves the operating characteristics of MEMS rotary motors. The liquid bearing provides wear-free, low-friction, passive alignment between the rotor and stator. Droplets are positioned relative to the rotor and stator through patterned superhydrophobic and hydrophilic surface coatings. The liquid bearing consists of a central droplet that acts as the motor shaft, providing axial alignment between rotor and stator, and satellite droplets, analogous to ball-bearings, that provide tip and tilt stable operation. The liquid bearing friction performance is characterized through measurement of the rotational drag coefficient and minimum starting torque due to stiction and geometric effects. Bearing operational performance is further characterized by modeling and measuring stiffness, environmental survivability, and high

  4. Sandia Agile MEMS Prototyping, Layout Tools, Education and Services Program

    Energy Technology Data Exchange (ETDEWEB)

    Schriner, H.; Davies, B.; Sniegowski, J.; Rodgers, M.S.; Allen, J.; Shepard, C.

    1998-05-01

    Research and development in the design and manufacture of Microelectromechanical Systems (MEMS) is growing at an enormous rate. Advances in MEMS design tools and fabrication processes at Sandia National Laboratories` Microelectronics Development Laboratory (MDL) have broadened the scope of MEMS applications that can be designed and manufactured for both military and commercial use. As improvements in micromachining fabrication technologies continue to be made, MEMS designs can become more complex, thus opening the door to an even broader set of MEMS applications. In an effort to further research and development in MEMS design, fabrication, and application, Sandia National Laboratories has launched the Sandia Agile MEMS Prototyping, Layout Tools, Education and Services Program or SAMPLES program. The SAMPLES program offers potential partners interested in MEMS the opportunity to prototype an idea and produce hardware that can be used to sell a concept. The SAMPLES program provides education and training on Sandia`s design tools, analysis tools and fabrication process. New designers can participate in the SAMPLES program and design MEMS devices using Sandia`s design and analysis tools. As part of the SAMPLES program, participants` designs are fabricated using Sandia`s 4 level polycrystalline silicon surface micromachine technology fabrication process known as SUMMiT (Sandia Ultra-planar, Multi-level MEMS Technology). Furthermore, SAMPLES participants can also opt to obtain state of the art, post-fabrication services provided at Sandia such as release, packaging, reliability characterization, and failure analysis. This paper discusses the components of the SAMPLES program.

  5. Rigid spine reinforced polymer microelectrode array probe and method of fabrication

    Science.gov (United States)

    Tabada, Phillipe; Pannu, Satinderpall S

    2014-05-27

    A rigid spine-reinforced microelectrode array probe and fabrication method. The probe includes a flexible elongated probe body with conductive lines enclosed within a polymeric material. The conductive lines connect microelectrodes found near an insertion end of the probe to respective leads at a connector end of the probe. The probe also includes a rigid spine, such as made from titanium, fixedly attached to the probe body to structurally reinforce the probe body and enable the typically flexible probe body to penetrate and be inserted into tissue, such as neural tissue. By attaching or otherwise fabricating the rigid spine to connect to only an insertion section of the probe body, an integrally connected cable section of the probe body may remain flexible.

  6. The nucleation of Ni on carbon microelectrodes and its electrocatalytic activity in hydrogen evolution

    International Nuclear Information System (INIS)

    Petrovic, Z.; Metikos-Hukovic, M.; Grubac, Z.; Omanovic, S.

    2006-01-01

    The paper discusses results on the nucleation (electrocrystallization) of nickel on an assembly of carbon microelectrodes and its electrocatalytic activity in the hydrogen evolution reaction. It has been shown that within an appropriate potential range the nickel electrocrystallization follows a three-dimensional progressive nucleation and diffusion controlled stable cluster growth. Analysis of the experimental current transients has been carried out using a modified form of the Scharifker and Mostany equation that considers only the relevant part of the current density response. A set of kinetic and thermodynamic parameters has been determined: the nucleation rate, the number of atoms in the critical nucleus, the diffusion coefficient, and the Gibbs energy of nuclei formation. Ac and dc measurements on hydrogen evolution in an alkaline solution have demonstrated an increased electrocatalytic activity of the nanostructured Ni layer on carbon microelectrodes in the hydrogen evolution reaction in comparison to a bulk nickel electrode

  7. The fabrication of microelectrode array biochip on PET using plate-to-plate NIL

    Science.gov (United States)

    Beh, Khi Khim; Samsuri, Fahmi; Lee, Lai Seng; Ooi, Su Guan; Ong, Wei Jie; Mohamed, Khairudin

    2017-07-01

    Polyethylene terephthalate (PET) films are useful for various applications due to the characterization of PET were flexibility, thermal resistance and chemical resistant. PET Films are widely used in both commercial and industrial today since they are highly demand in the market. In this study, microelectrode array biochip was fabricated on flexible PET film using (plate-to-plate) nanoimprint lithography (NIL). The PET films acted as substrate while PDMS as the mould. The Polydimethylsiloxane (PDMS) mould was attached on top of the PET film and additionally clamped between two pieces of glass. A mild force was applied to it for REM (replica moulding). A study was carried out upon the surface profiling of the PDMS mould and PET to monitor the possibility of deformation after applying force upon the samples. The experiment shall present the finding of required force to REM the microelectrode array biochip pattern on the PET film.

  8. Theoretical and experimental comparison of microelectrode sensing configurations for impedimetric cell monitoring

    DEFF Research Database (Denmark)

    Carminati, M.; Caviglia, Claudia; Heiskanen, Arto

    2013-01-01

    microelectrodes using a versatile custom-made monitoring platform including a 24-channel miniaturized potentiostat. The characterization of bare microelectrodes in buffer and tracking experiments with HeLa cells over 16 hours demonstrate that the coplanar configuration provides a higher sensitivity to cell......A theoretical and experimental comparison between vertical and coplanar interdigitated sensing configurations for impedimetric cell growth tracking is presented. These widely-adopted approaches are quantitatively compared on the same cell populations and on the same 10 μm interdigitated...... adhesion and spreading (Cell Index = 1.6 vs. 0.4) albeit at a higher frequency of maximum sensitivity (100 kHz vs. 24 kHz) shifting over time. © 2014 Taylor & Francis Group....

  9. Nanowire-templated microelectrodes for high-sensitivity pH detection

    DEFF Research Database (Denmark)

    Antohe, V.A.; Radu, Adrian; Mátéfi-Tempfli, Mária

    2009-01-01

    A highly sensitive pH capacitive sensor has been designed by confined growth of vertically aligned nanowire arrays on interdigited microelectrodes. The active surface of the device has been functionalized with an electrochemical pH transducer (polyaniline). We easily tune the device features...... by combining lithographic techniques with electrochemical synthesis. The reported electrical LC resonance measurements show considerable sensitivity enhancement compared to conventional capacitive pH sensors realized with microfabricated interdigited electrodes. The sensitivity can be easily improved...

  10. Enhanced electroanalysis in lithium potassium eutectic (LKE) using microfabricated square microelectrodes.

    Science.gov (United States)

    Corrigan, Damion K; Blair, Ewen O; Terry, Jonathan G; Walton, Anthony J; Mount, Andrew R

    2014-11-18

    Molten salts (MSs) are an attractive medium for chemical and electrochemical processing and as a result there is demand for MS-compatible analysis technologies. However, MSs containing redox species present a challenging environment in which to perform analytical measurements because of their corrosive nature, significant thermal convection and the high temperatures involved. This paper outlines the fabrication and characterization of microfabricated square microelectrodes (MSMs) designed for electrochemical analysis in MS systems. Their design enables precise control over electrode dimension, the minimization of stress because of differential thermal expansion through design for high temperature operation, and the minimization of corrosive attack through effective insulation. The exemplar MS system used for characterization was lithium chloride/potassium chloride eutectic (LKE), which has potential applications in pyrochemical nuclear fuel reprocessing, metal refining, molten salt batteries and electric power cells. The observed responses for a range of redox ions between 400 and 500 °C (673 and 773 K) were quantitative and typical of microelectrodes. MSMs also showed the reduced iR drop, steady-state diffusion-limited response, and reduced sensitivity to convection seen for microelectrodes under ambient conditions and expected for these electrodes in comparison to macroelectrodes. Diffusion coefficients were obtained in close agreement with literature values, more readily and at greater precision and accuracy than both macroelectrode and previous microelectrode measurements. The feasibility of extracting individual physical parameters from mixtures of redox species (as required in reprocessing) and of the prolonged measurement required for online monitoring was also demonstrated. Together, this demonstrates that MSMs provide enhanced electrode devices widely applicable to the characterization of redox species in a range of MS systems.

  11. Flexible polyimide microelectrode array for in vivo recordings and current source density analysis

    OpenAIRE

    Cheung, Karen; Renaud, Philippe; Tanila, Heikki; Djupsund, Kaj

    2007-01-01

    This work presents implantable, flexible polymer-based probes with embedded microelectrodes for acute and chronic neural recordings in vivo, as tested on rodents. Acute recordings using this array were done in mice under urethane anesthesia and compared to those made using silicon-based probes manufactured at the Center for Neural Communication Technology, University of Michigan. The two electrode arrays yielded similar results. Recordings with chronically implanted polymer-based electr...

  12. Novel strategy for sulfapyridine detection using a fully integrated electrochemical Bio-MEMS: Application to honey analysis.

    Science.gov (United States)

    Hassani, Nadia El Alami El; Baraket, Abdoullatif; Neto, Ernandes Taveira Tenório; Lee, Michael; Salvador, J-Pablo; Marco, M-Pilar; Bausells, Joan; Bari, Nezha El; Bouchikhi, Benachir; Elaissari, Abdelhamid; Errachid, Abdelhamid; Zine, Nadia

    2017-07-15

    Sulfapyridine (SPy) is a sulfonamide antibiotic largely employed as veterinary drugs for prophylactic and therapeutic purposes. Therefore, its spread in the food products has to be restricted. Herein, we report the synthesis and characterization of a novel electrochemical biosensor based on gold microelectrodes modified with a new structure of magnetic nanoparticles (MNPs) coated with poly(pyrrole-co-pyrrole-2-carboxylic acid) (Py/Py-COOH) for high efficient detection of SPy. This analyte was quantified through a competitive detection procedure with 5-[4-(amino)phenylsulfonamide]-5-oxopentanoic acid-BSA (SA2-BSA) antigens toward polyclonal antibody (Ab-155). Initially, gold working electrodes (WEs) of integrated biomicro electro-mechanical system (BioMEMS) were functionalized by Ppy-COOH/MNPs, using a chronoamperometric (CA) electrodeposition. Afterward, SA2-BSA was covalently bonded to Py/Py-COOH/MNP modified gold WEs through amide bonding. The competitive detection of the analyte was made by a mixture of a fixed concentration of Ab-155 and decreasing concentrations of SPy from 50µgL -1 to 2ngL -1 . Atomic Force Microscopy characterization was performed in order to ensure Ppy-COOH/MNPs electrodeposition on the microelectrode surfaces. Electrochemical measurements of SPy detection were carried out using electrochemical impedance spectroscopy (EIS). This biosensor was found to be highly sensitive and specific for SPy, with a limit of detection of 0.4ngL -1 . This technique was exploited to detect SPy in honey samples by using the standard addition method. The measurements were highly reproducible for detection and interferences namely, sulfadiazine (SDz), sulfathiazole (STz) and sulfamerazine (SMz). Taking these advantages of sensitivity, specificity, and low cost, our system provides a new horizon for development of advanced immunoassays in industrial food control. Copyright © 2016. Published by Elsevier B.V.

  13. A Label-Free Microelectrode Array Based on One-Step Synthesis of Chitosan–Multi-Walled Carbon Nanotube–Thionine for Ultrasensitive Detection of Carcinoembryonic Antigen

    Directory of Open Access Journals (Sweden)

    Huiren Xu

    2016-07-01

    Full Text Available Carcinoembryonic antigen (CEA has been an extensively used tumor marker responsible for clinical early diagnosis of cervical carcinomas, and pancreatic, colorectal, gastric and lung cancer. Combined with micro-electro mechanical system (MEMS technology, it is important to develop a novel immune microelectrode array (MEA not only for rapid analysis of serum samples, but also for cell detection in vitro and in vivo. In this work, we depict a simple approach to modify chitosan–multi-walled carbon nanotubes–thionine (CS–MWCNTs–THI hybrid film through one-step electrochemical deposition and the CS-MWCNTs-THI hybrid films are successfully employed to immobilize anti-CEA for fabricating simple, label-free, and highly sensitive electro-chemical immune MEAs. The detection principle of immune MEA was based on the fact that the increasing formation of the antigen-antibody immunocomplex resulted in the decreased response currents and the relationship between the current reductions with the corresponding CEA concentrations was directly proportional. Experimental results indicated that the label-free MEA had good selectivity and the limit of detection for CEA is 0.5 pg/mL signal to noise ratio (SNR = 3. A linear calibration plot for the detection of CEA was obtained in a wide concentration range from 1 pg/mL to 100 ng/mL (r = 0.996. This novel MEA has potential applications for detecting CEA for the research on cancer cells and cancer tissue slices as well as for effective early diagnosis.

  14. Microfabrication, characterization and in vivo MRI compatibility of diamond microelectrodes array for neural interfacing

    Energy Technology Data Exchange (ETDEWEB)

    Hébert, Clément, E-mail: clement.hebert@cea.fr [Institut Néel, CNRS et Université Joseph Fourier, BP 166, F-38042 Grenoble Cedex 9 (France); Warnking, Jan; Depaulis, Antoine [INSERM, U836, Grenoble Institut des Neurosciences, Grenoble (France); Garçon, Laurie Amandine [Institut Néel, CNRS et Université Joseph Fourier, BP 166, F-38042 Grenoble Cedex 9 (France); CEA/INAC/SPrAM/CREAB, 17 rue des Martyrs, 38054 Grenoble Cedex 9 (France); Mermoux, Michel [Université Grenoble Alpes, LEPMI, F-38000 Grenoble (France); CNRS, LEPMI, F-38000 Grenoble (France); Eon, David [Institut Néel, CNRS et Université Joseph Fourier, BP 166, F-38042 Grenoble Cedex 9 (France); Mailley, Pascal [CEA-LETI-DTBS Minatec, 17 rue des Martyres, 38054 Grenoble (France); Omnès, Franck [Institut Néel, CNRS et Université Joseph Fourier, BP 166, F-38042 Grenoble Cedex 9 (France)

    2015-01-01

    Neural interfacing still requires highly stable and biocompatible materials, in particular for in vivo applications. Indeed, most of the currently used materials are degraded and/or encapsulated by the proximal tissue leading to a loss of efficiency. Here, we considered boron doped diamond microelectrodes to address this issue and we evaluated the performances of a diamond microelectrode array. We described the microfabrication process of the device and discuss its functionalities. We characterized its electrochemical performances by cyclic voltammetry and impedance spectroscopy in saline buffer and observed the typical diamond electrode electrochemical properties, wide potential window and low background current, allowing efficient electrochemical detection. The charge storage capacitance and the modulus of the electrochemical impedance were found to remain in the same range as platinum electrodes used for standard commercial devices. Finally we observed a reduced Magnetic Resonance Imaging artifact when the device was implanted on a rat cortex, suggesting that boron doped-diamond is a very promising electrode material allowing functional imaging. - Highlights: • Microfabrication of all-diamond microelectrode array • Evaluation of as-grown nanocrystalline boron-doped diamond for electrical neural interfacing • MRI compatibility of nanocrystalline boron-doped diamond.

  15. Boron-doped diamond nano/microelectrodes for bio-sensing and in vitro measurements

    Science.gov (United States)

    Dong, Hua; Wang, Shihua; Galligan, James J.; Swain, Greg M.

    2015-01-01

    Since the fabrication of the first diamond electrode in the mid 1980s, repid progress has been made on the development and application of this new type of electrode material. Boron-doped diamond (BDD) electrodes exhibit outstanding properties compared to oxygen-containing sp2 carbon electrodes. These properties make BDD electrodes an ideal choice for use in complex samples. In recent years, BDD microelectrodes have been applied to in vitro and in vivo measurements of biological molecules in animals, tissues and cells. This review will summarize recent progress in the development and applications of BDD electrodes in bio-sensing and in vitro measurements of biomolecules. In the first section, the methods for BDD nanocrystalline diamond film deposition and BDD microelectrodes preparation are described. This is followed by a description and discussion of several approaches for characterization of the BDD electrode surface structure, morphology, and electrochemical activity. Further, application of BDD microelectrodes for use in the in vitro analysis of norepinephrine (NE), serotonin (5-HT), nitric oxide (NO), histamine, and adenosine from tissues are summarized and finally some of the remaining challenges are discussed. PMID:21196394

  16. Microelectrode array recordings from the ventral roots in chronically implanted cats

    Directory of Open Access Journals (Sweden)

    Shubham eDebnath

    2014-07-01

    Full Text Available The ventral spinal roots contain the axons of spinal motoneurons and provide the only location in the peripheral nervous system where recorded neural activity can be assured to be motor rather than sensory. This study demonstrates recordings of single unit activity from these ventral root axons using floating microelectrode arrays (FMAs. Ventral root recordings were characterized by examining single unit yield and signal-to-noise ratios (SNR with 32-channel FMAs implanted chronically in the L6 and L7 spinal roots of 9 cats. Single unit recordings were performed for implant periods of up to 12 weeks. Motor units were identified based on active discharge during locomotion and inactivity under anesthesia. Motor unit yield and SNR were calculated for each electrode, and results were grouped by electrode site size, which were varied systematically between 25-160 μm to determine effects on signal quality. The unit yields and SNR did not differ significantly across this wide range of electrode sizes. Both SNR and yield decayed over time, but electrodes were able to record spikes with SNR > 2 up to 12 weeks post-implant. These results demonstrate that it is feasible to record single unit activity from multiple isolated motor units with penetrating microelectrode arrays implanted chronically in the ventral spinal roots. This approach could be useful for creating a spinal nerve interface for advanced neural prostheses, and results of this study will be used to improve design of microelectrodes for chronic neural recording in the ventral spinal roots.

  17. Robust Functionalization of Large Microelectrode Arrays by Using Pulsed Potentiostatic Deposition

    Directory of Open Access Journals (Sweden)

    Joerg Rothe

    2016-12-01

    Full Text Available Surface modification of microelectrodes is a central step in the development of microsensors and microsensor arrays. Here, we present an electrodeposition scheme based on voltage pulses. Key features of this method are uniformity in the deposited electrode coatings, flexibility in the overall deposition area, i.e., the sizes and number of the electrodes to be coated, and precise control of the surface texture. Deposition and characterization of four different materials are demonstrated, including layers of high-surface-area platinum, gold, conducting polymer poly(ethylenedioxythiophene, also known as PEDOT, and the non-conducting polymer poly(phenylenediamine, also known as PPD. The depositions were conducted using a fully integrated complementary metal-oxide-semiconductor (CMOS chip with an array of 1024 microelectrodes. The pulsed potentiostatic deposition scheme is particularly suitable for functionalization of individual electrodes or electrode subsets of large integrated microelectrode arrays: the required deposition waveforms are readily available in an integrated system, the same deposition parameters can be used to functionalize the surface of either single electrodes or large arrays of thousands of electrodes, and the deposition method proved to be robust and reproducible for all materials tested.

  18. MEMS for Tunable Photonic Metamaterial Applications

    Science.gov (United States)

    Stark, Thomas

    Photonic metamaterials are materials whose optical properties are derived from artificially-structured sub-wavelength unit cells, rather than from the bulk properties of the constituent materials. Examples of metamaterials include plasmonic materials, negative index materials, and electromagnetic cloaks. While advances in simulation tools and nanofabrication methods have allowed this field to grow over the past several decades, many challenges still exist. This thesis addresses two of these challenges: fabrication of photonic metamaterials with tunable responses and high-throughput nanofabrication methods for these materials. The design, fabrication, and optical characterization of a microelectromechanical systems (MEMS) tunable plasmonic spectrometer are presented. An array of holes in a gold film, with plasmon resonance in the mid-infrared, is suspended above a gold reflector, forming a Fabry-Perot interferometer of tunable length. The spectra exhibit the convolution of extraordinary optical transmission through the holes and Fabry-Perot resonances. Using MEMS, the interferometer length is modulated from 1.7 mum to 21.67 mum , thereby tuning the free spectral range from about 2900 wavenumbers to 230.7 wavenumbers and shifting the reflection minima and maxima across the infrared. Due to its broad spectral tunability in the fingerprint region of the mid-infrared, this device shows promise as a tunable biological sensing device. To address the issue of high-throughput, high-resolution fabrication of optical metamaterials, atomic calligraphy, a MEMS-based dynamic stencil lithography technique for resist-free fabrication of photonic metamaterials on unconventional substrates, has been developed. The MEMS consists of a moveable stencil, which can be actuated with nanometer precision using electrostatic comb drive actuators. A fabrication method and flip chip method have been developed, enabling evaporation of metals through the device handle for fabrication on an

  19. High-stability 48-core bendable and movable optical cable for FAST telescope optical transmission system

    Science.gov (United States)

    Liu, Hongfei; Pan, Gaofeng; Lin, Zhong; Liu, Cheng; Zhu, Wenbai; Nan, Rendong; Li, Chunsheng; Gao, Guanjun; Luo, Wenyong; Jin, Chengjin; Song, Jinyou

    2017-11-01

    The construction of FAST telescope was completed in Guizhou province of China in September 2016, and a kind of novel high-stability 48-core bendable and movable optical cable was developed and applied in analog data optical transmission system of FAST. Novel structure and selective material of this optical cable ensure high stability of optical power in the process of cables round-trip motion when telescope is tracking a radio source. The 105 times bend and stretch accelerated experiment for this optical cable was implemented, and real-time optical and RF signal power fluctuation were measured. The physical structure of optical cables after 105 times round-trip motion is in good condition; the real-time optical power attenuation fluctuation is smaller than 0.044 dB; the real-time RF power fluctuation is smaller than 0.12 dB. The optical cable developed in this letter meets the requirement of FAST and has been applied in FAST telescope.

  20. Research on the electromagnetic structure of movable coil electromagnet drive mechanism for reactor control rod

    International Nuclear Information System (INIS)

    Zhang Jige; Yian Huijie; Wu Yuanqiang; Wu Xinxin; Yu Suyuan; He Shuyan

    2007-01-01

    The movable coil electromagnet drive mechanism (MCEDM) is a new drive scheme for the reactor control rod, and it has a simple structure, good security and reliability property, etc. MCEDM with an air cooled structure has been used in the land research reactor. In order to apply MCEDM to the mobile reactor, experimental and theoretical study on the electromagnet with an oil-water cooled structure and a single magnetic flux circuit (called the type A electro-magnet) has been completed. It is proven by the experiment and theory that the oil-water cooled structure is an excellent measure to increase the coil current of MCEDM. Moreover, a type B electromagnet with an oil-water cooled structure and double magnetic flux circuits is designed to further increase the magnetic force of MCEDM. The analysis of finite element method shows that the type B electromagnet could double the saturation current of type A electro-magnet and the magnetic force of type B electromagnet is greater than that of the type A electromagnet. Moreover, it is proven that the dynamic property of type B electromagnet is better than type A electromagnet. (author)

  1. Restoration of Worn Movable Bridge Props with Use of Bronze Claddings

    Directory of Open Access Journals (Sweden)

    Ján Viňáš

    2018-03-01

    Full Text Available This article examined the possibility of using CuSn6P claddings in sliding bearing renovation of movable pontoon bridge props. The bronze layer was welded on cylinders of the high-strength steel S355J0WP EN 10155-93, in an inert atmosphere using an automated welding method (gas tungsten arc welding. Pulsed arc welding was used to minimize the effects of heat on the cladding area, while also accounting for the differences in the physical properties of the joined metals. The sliding bearing was created in two layers. The quality of the cladding layer was evaluated by nondestructive and/or destructive tests. The quality of the surface was assessed by visual inspection (visual testing in accordance with the EN ISO 17637 standard. The quality of the claddings was evaluated by metallographic analysis, performed using light microscopy. The microhardness values of a few weld areas were determined by Vickers tests, performed according to the EN ISO 9015–2 standard. The analyses confirmed that the welding parameters and filler material used resulted in high-quality weld joints with no internal (subsurface or metallurgical defects.

  2. The Multipoint Global Shape Optimization of Flying Configuration with Movable Leading Edges Flaps

    Directory of Open Access Journals (Sweden)

    Adriana NASTASE

    2012-12-01

    Full Text Available The aerodynamical global optimized (GO shape of flying configuration (FC, at two cruising Mach numbers, can be realized by morphing. Movable leading edge flaps are used for this purpose. The equations of the surfaces of the wing, of the fuselage and of the flaps in stretched position are approximated in form of superpositions of homogeneous polynomes in two variables with free coefficients. These coefficients together with the similarity parameters of the planform of the FC are the free parameters of the global optimization. Two enlarged variational problems with free boundaries occur. The first one consists in the determination of the GO shape of the wing-fuselageFC, with the flaps in retracted position, which must be of minimum drag, at higher cruising Mach number. The second enlarged variational problem consists in the determination of the GO shape of the flaps in stretched position in such a manner that the entire FC shall be of minimum drag at the second lower Mach number. The iterative optimum-optimorum (OO theory of the author is used for the solving of these both enlarged variational problems. The inviscid GO shape of the FC is used only in the first step of iteration and the own developed hybrid solutions for the compressible Navier-Stokes partial-differential equations (PDEs are used for the determination of the friction drag coefficient and up the second step of iteration of OO theory.

  3. Characterization of a vertically movable gate field effect transistor using a silicon-on-insulator wafer

    International Nuclear Information System (INIS)

    Song, In-Hyouk; Forfang, William B D; Cole, Bryan; Hee You, Byoung

    2014-01-01

    The vertically movable gate field effect transistor (VMGFET) is a FET-based sensing element, whose gate moves in a vertical direction over the channel. A VMGFET gate covers the region between source and drain. A 1 μm thick air layer separates the gate and the substrate of the VMGFET. A novel fabrication process to form a VMGFET using a silicon-on-insulator (SOI) wafer provides minimal internal stress of the gate structure. The enhancement-type n-channel VMGFET is fabricated with the threshold voltage of 2.32 V in steady state. A non-inverting amplifier is designed and integrated on a printable circuit board (PCB) to characterize device sensitivity and mechanical properties. The VMGFET is mechanically coupled to a speaker membrane to apply mechanical vibration. The oscillated drain current of FET are monitored and sampled with NI LabVIEW. The frequency of the output signal correlates with that of the input stimulus. The resonance frequency of the fabricated VMGFET is measured to be 1.11 kHz. The device sensitivity linearly increases by 0.106 mV/g Hz in the range of 150 Hz and 1 kHz. (paper)

  4. Synthesis of hollow asymmetrical silica dumbbells with a movable inner core.

    Science.gov (United States)

    Nagao, Daisuke; van Kats, Carlos M; Hayasaka, Kentaro; Sugimoto, Maki; Konno, Mikio; Imhof, Arnout; van Blaaderen, Alfons

    2010-04-06

    Hollow asymmetrical silica dumbbells containing a movable inner core were fabricated by a template-assisted method. Three different templates were employed for the fabrication of the hollow asymmetrical dumbbells. For the preparation of the first template, silica particles were uniformly covered with a cross-linked polymethylmethacrylate (PMMA) shell and the polymerization of styrene was conducted to induce a protrusion of polystyrene (PSt) from the PMMA shell. Anisotropic colloids composed of silica, PMMA, and PSt were used as templates, coated with a silica shell, and held at 500 degrees C for 2 h to remove the polymer interior components of the template colloid. The heat treatment successfully produced hollow asymmetrical silica dumbbells containing an inner silica core. After being dried, approximately 50% of the inner silica particles that were originally coated with PMMA ended up in the other hollow sphere in which the PSt component existed before heat treatment, indicating that the inner silica particles could pass through the hollow asymmetrical dumbbells' necks and were free to move in the interior. In the preparation of the second and third asymmetrical dumbbell templates, magnetic silica particles and titania particles, respectively, were covered with a PMMA shell to incorporate externally responsive particles into the hollow silica shells as above. The successful syntheses demonstrated the generality of our approach. The passage of the responsive particles through the dumbbell's neck enabled active control of the position of the responsive particles inside the asymmetrical dumbbells by external fields.

  5. Controller Design and Experiment for Tracking Mount of Movable SLR, ARGO-M

    Directory of Open Access Journals (Sweden)

    Cheol Hoon Park

    2012-04-01

    Full Text Available Controller design procedure for prototype tracking mount of Movable SLR (Satellite Laser Ranging, ARGO-M is presented. Tracking mount of ARGO-M is altitude-azimuth type and it has two axes of elevation and azimuth to control its position. Controller consists of velocity and acceleration feed-forward controller, position controller at outer loop, velocity controller at inner loop. There are two kinds of position control modes. One is the pointing mode to move from one position to the other position as fast as possible and the other one is tracking mode to follow SLR trajectory as precise as possible. Because the requirement of tracking accuracy is less than 5 arcsec and it is very tight error budget, a sophisticated controller needs to be prepared to meet the accuracy. Especially, ARGO-M is using the cross-roller bearing at each axis to increase the mechanical accuracy, which requires add-on controller DOB (Disturbance observer to suppress friction load and low frequency disturbances. The pointing and tracking performance of the designed controller is simulated and visualized using MATLAB/ Simulink and SimMechanics and the experimental results using test are presented as well.

  6. Large-scale recording of neurons by movable silicon probes in behaving rodents.

    Science.gov (United States)

    Vandecasteele, Marie; M, S; Royer, Sébastien; Belluscio, Mariano; Berényi, Antal; Diba, Kamran; Fujisawa, Shigeyoshi; Grosmark, Andres; Mao, Dun; Mizuseki, Kenji; Patel, Jagdish; Stark, Eran; Sullivan, David; Watson, Brendon; Buzsáki, György

    2012-03-04

    A major challenge in neuroscience is linking behavior to the collective activity of neural assemblies. Understanding of input-output relationships of neurons and circuits requires methods with the spatial selectivity and temporal resolution appropriate for mechanistic analysis of neural ensembles in the behaving animal, i.e. recording of representatively large samples of isolated single neurons. Ensemble monitoring of neuronal activity has progressed remarkably in the past decade in both small and large-brained animals, including human subjects. Multiple-site recording with silicon-based devices are particularly effective because of their scalability, small volume and geometric design. Here, we describe methods for recording multiple single neurons and local field potential in behaving rodents, using commercially available micro-machined silicon probes with custom-made accessory components. There are two basic options for interfacing silicon probes to preamplifiers: printed circuit boards and flexible cables. Probe supplying companies (http://www.neuronexustech.com/; http://www.sbmicrosystems.com/; http://www.acreo.se/) usually provide the bonding service and deliver probes bonded to printed circuit boards or flexible cables. Here, we describe the implantation of a 4-shank, 32-site probe attached to flexible polyimide cable, and mounted on a movable microdrive. Each step of the probe preparation, microdrive construction and surgery is illustrated so that the end user can easily replicate the process.

  7. [FEATURES OF THE CONTENT OF MOVABLE FORMS OF HEAVY METALS AND SELENIUM IN SOILS OF THE YAROSLAVL REGION].

    Science.gov (United States)

    Bakaeva, E A; Eremeyshvili, A V

    2016-01-01

    With the use of the method of inversion voltammetry there was analyzed the content of movableforms of trace elements: (selenium, zinc, copper lead, cadmium) in soils in the Yaroslavl district of the Yaroslavl region, and also content of zinc, copper lead, cadmium in soils and snow cover in the city of Yaroslavl. According to values of concentrations of movable compounds in soils determined trace elements can be ranked into the following row: zinc > lead > copper > selenium > cadmium. There was revealed insufficient if compared with literature data concentrations, content of movable compounds of selenium, copper and zinc in examined explored soils. The maximal concentrations of lead are revealed in the close proximity to both the city of Yaroslavl and large highways of the city. It indicates to the anthropogenic pollution of soils by this element.

  8. Development of Microelectrode Arrays Using Electroless Plating for CMOS-Based Direct Counting of Bacterial and HeLa Cells.

    Science.gov (United States)

    Niitsu, Kiichi; Ota, Shoko; Gamo, Kohei; Kondo, Hiroki; Hori, Masaru; Nakazato, Kazuo

    2015-10-01

    The development of two new types of high-density, electroless plated microelectrode arrays for CMOS-based high-sensitivity direct bacteria and HeLa cell counting are presented. For emerging high-sensitivity direct pathogen counting, two technical challenges must be addressed. One is the formation of a bacteria-sized microelectrode, and the other is the development of a high-sensitivity and high-speed amperometry circuit. The requirement for microelectrode formation is that the gold microelectrodes are required to be as small as the target cell. By improving a self-aligned electroless plating technique, the dimensions of the microelectrodes on a CMOS sensor chip in this work were successfully reduced to 1.2 μm × 2.05 μm. This is 1/20th of the smallest size reported in the literature. Since a bacteria-sized microelectrode has a severe limitation on the current flow, the amperometry circuit has to have a high sensitivity and high speed with low noise. In this work, a current buffer was inserted to mitigate the potential fluctuation. Three test chips were fabricated using a 0.6- μm CMOS process: two with 1.2 μm × 2.05 μm (1024 × 1024 and 4 × 4) sensor arrays and one with 6- μm square (16 × 16) sensor arrays; and the microelectrodes were formed on them using electroless plating. The uniformity among the 1024 × 1024 electrodes arranged with a pitch of 3.6 μm × 4.45 μm was optically verified. For improving sensitivity, the trenches on each microelectrode were developed and verified optically and electrochemically for the first time. Higher sensitivity can be achieved by introducing a trench structure than by using a conventional microelectrode formed by contact photolithography. Cyclic voltammetry (CV) measurements obtained using the 1.2 μm × 2.05 μm 4 × 4 and 6- μm square 16 × 16 sensor array with electroless-plated microelectrodes successfully demonstrated direct counting of the bacteria-sized microbeads and HeLa cells.

  9. Development of the triaxial precise movable table for the precision and accuracy assessment of the kinematic GNSS time series

    Science.gov (United States)

    Ohta, Y.; Imano, M.; Kido, M.

    2016-12-01

    Kinematic analysis of Global Navigation Satellite System (GNSS) data is useful for the extraction of crustal deformation phenomena occurring over short timescales ranging from seconds to one day, such as co- and postseismic deformation following large earthquakes including real-time crustal deformation monitoring. Kinematic GNSS data analysis is not only useful for the onshore observation but also useful for the offshore geodetic observation such as GNSS/Acoustic measurement. The assessment of precision and accuracy of the kinematic GNSS is, however, difficult because there is no indicator of "true" in the offshore region. Based on these background, we developed the triaxial precise movable table for the precision and accuracy assessment of the kinematic GNSS time series. The developed movable table has functions of horizontal displacement, rotation, and tilt of the GNSS antenna. The all moving functions can operate simultaneously with 10Hz sampling interval by the controller. The control precision of the horizontal displacement, rotation degree, and tilt degree is 0.1mm, 0.2degree, and 0.2degree, respectively. Based on the developed movable table, we assess the precision of the real-time kinematic PPP time series. We used the RTKLIB ver. 2.4.2. (Takasu, 2013) for the real-time PPP analysis with JAXA MADOCA products for the real-time orbit and clock information. As the preliminary experiment, we assumed the one-axis horizontal motion based on the supposition of an actual ship movement. As the result, the real-time PPP time series can reproduce the assumed motion within 10mm in the horizontal component during 1,000 seconds data set. We will show more detail results with more realistic motion and longer time data set, based on the developed movable table.

  10. Modeling mechanical behaviors of composites with various ratios of matrix–inclusion properties using movable cellular automaton method

    OpenAIRE

    A.Yu. Smolin; E.V. Shilko; S.V. Astafurov; I.S. Konovalenko; S.P. Buyakova; S.G. Psakhie

    2015-01-01

    Two classes of composite materials are considered: classical metal–ceramic composites with reinforcing hard inclusions as well as hard ceramics matrix with soft gel inclusions. Movable cellular automaton method is used for modeling the mechanical behaviors of such different heterogeneous materials. The method is based on particle approach and may be considered as a kind of discrete element method. The main feature of the method is the use of many-body forces of inter-element interaction withi...

  11. Electroplating of low stress permalloy for MEMS

    International Nuclear Information System (INIS)

    Zhang Yonghua; Ding Guifu; Cai Yuli; Wang Hong; Cai Bingchu

    2006-01-01

    With the wafer-bending method and spectrophotometry, the internal stress in electroplated Ni-Fe alloy for MEMS has been investigated as a function of bath concentration. This investigation demonstrated that low concentration plating solution is useful for the decrease of the residual stress in the electrodeposits, and the stress could further decrease with an increase of saccharin additive content. And the change of stress from tensile to compressive was not observed with the increase of the additive content in plating path. The low stress permalloy (Ni 81 Fe 19 ) was reached in our experimental conditions. A bistable electromagnetic RF MEMS switch with deformation-free bilayer cantilever beam was fabricated successfully by electroplated permalloy

  12. MEMS wireless temperature sensor for combustion studies

    Science.gov (United States)

    Lee, Minhyeok; Kawahara, Yoshihiro; Morimoto, Kenichi; Suzuki, Yuji

    2014-11-01

    A MEMS wireless wall temperature sensor for combustion studies is proposed. Electrical resistance change in a LCR circuit is used to measure the temperature through inductive coupling the sensor coil and the read-out coil. Equivalent circuit model and 3-D electromagnetic simulation are employed to design sensor configuration. The resonant frequency is increased with increasing the resistance due to the temperature increase. The prototype sensor was successfully fabricated with MEMS technologies. The impedance phase angle shows a sharp dip at the resonant frequency, which is in good accordance with the equivalent circuit model. The measured temperature sensitivity is found to be as high as 6 kHz/K, when the distance between the read-out and the sensor coils is 0.71 mm.

  13. MEMS Packaging - Current Issues and Approaches

    Energy Technology Data Exchange (ETDEWEB)

    DRESSENDORFER,PAUL V.; PETERSON,DAVID W.; REBER,CATHLEEN ANN

    2000-01-19

    The assembly and packaging of MEMS (Microelectromechanical Systems) devices raise a number of issues over and above those normally associated with the assembly of standard microelectronic circuits. MEMS components include a variety of sensors, microengines, optical components, and other devices. They often have exposed mechanical structures which during assembly require particulate control, space in the package, non-contact handling procedures, low-stress die attach, precision die placement, unique process schedules, hermetic sealing in controlled environments (including vacuum), and other special constraints. These constraints force changes in the techniques used to separate die on a wafer, in the types of packages which can be used in the assembly processes and materials, and in the sealing environment and process. This paper discusses a number of these issues and provides information on approaches being taken or proposed to address them.

  14. SOI silicon on glass for optical MEMS

    DEFF Research Database (Denmark)

    Larsen, Kristian Pontoppidan; Ravnkilde, Jan Tue; Hansen, Ole

    2003-01-01

    A newly developed fabrication method for fabrication of single crystalline Si (SCS) components on glass, utilizing Deep Reactive Ion Etching (DRIE) of a Silicon On Insulator (SOI) wafer is presented. The devices are packaged at wafer level in a glass-silicon-glass (GSG) stack by anodic bonding...... and a final sealing at the interconnects can be performed using a suitable polymer. Packaged MEMS on glass are advantageous within Optical MEMS and for sensitive capacitive devices. We report on experiences with bonding SOI to Pyrex. Uniform DRIE shallow and deep etching was achieved by a combination...... of an optimized device layout and an optimized process recipe. The behavior of the buried oxide membrane when used as an etch stop for the through-hole etch is described. No harmful buckling or fracture of the membrane is observed for an oxide thickness below 1 μm, but larger and more fragile released structures...

  15. Giant Piezoelectricity on Si for Hyperactive MEMS

    Science.gov (United States)

    Baek, S. H.; Park, J.; Kim, D. M.; Aksyuk, V. A.; Das, R. R.; Bu, S. D.; Felker, D. A.; Lettieri, J.; Vaithyanathan, V.; Bharadwaja, S. S. N.; Bassiri-Gharb, N.; Chen, Y. B.; Sun, H. P.; Folkman, C. M.; Jang, H. W.; Kreft, D. J.; Streiffer, S. K.; Ramesh, R.; Pan, X. Q.; Trolier-McKinstry, S.; Schlom, D. G.; Rzchowski, M. S.; Blick, R. H.; Eom, C. B.

    2011-11-01

    Microelectromechanical systems (MEMS) incorporating active piezoelectric layers offer integrated actuation, sensing, and transduction. The broad implementation of such active MEMS has long been constrained by the inability to integrate materials with giant piezoelectric response, such as Pb(Mg1/3Nb2/3)O3-PbTiO3 (PMN-PT). We synthesized high-quality PMN-PT epitaxial thin films on vicinal (001) Si wafers with the use of an epitaxial (001) SrTiO3 template layer with superior piezoelectric coefficients (e31,f = -27 ± 3 coulombs per square meter) and figures of merit for piezoelectric energy-harvesting systems. We have incorporated these heterostructures into microcantilevers that are actuated with extremely low drive voltage due to thin-film piezoelectric properties that rival bulk PMN-PT single crystals. These epitaxial heterostructures exhibit very large electromechanical coupling for ultrasound medical imaging, microfluidic control, mechanical sensing, and energy harvesting.

  16. Image Registration for Stability Testing of MEMS

    Science.gov (United States)

    Memarsadeghi, Nargess; LeMoigne, Jacqueline; Blake, Peter N.; Morey, Peter A.; Landsman, Wayne B.; Chambers, Victor J.; Moseley, Samuel H.

    2011-01-01

    Image registration, or alignment of two or more images covering the same scenes or objects, is of great interest in many disciplines such as remote sensing, medical imaging. astronomy, and computer vision. In this paper, we introduce a new application of image registration algorithms. We demonstrate how through a wavelet based image registration algorithm, engineers can evaluate stability of Micro-Electro-Mechanical Systems (MEMS). In particular, we applied image registration algorithms to assess alignment stability of the MicroShutters Subsystem (MSS) of the Near Infrared Spectrograph (NIRSpec) instrument of the James Webb Space Telescope (JWST). This work introduces a new methodology for evaluating stability of MEMS devices to engineers as well as a new application of image registration algorithms to computer scientists.

  17. MEMS Gyroscopes Based on Acoustic Sagnac Effect

    Directory of Open Access Journals (Sweden)

    Yuanyuan Yu

    2016-12-01

    Full Text Available This paper reports on the design, fabrication and preliminary test results of a novel microelectromechanical systems (MEMS device—the acoustic gyroscope. The unique operating mechanism is based on the “acoustic version” of the Sagnac effect in fiber-optic gyros. The device measures the phase difference between two sound waves traveling in opposite directions, and correlates the signal to the angular velocity of the hosting frame. As sound travels significantly slower than light and develops a larger phase change within the same path length, the acoustic gyro can potentially outperform fiber-optic gyros in sensitivity and form factor. It also promises superior stability compared to vibratory MEMS gyros as the design contains no moving parts and is largely insensitive to mechanical stress or temperature. We have carried out systematic simulations and experiments, and developed a series of processes and design rules to implement the device.

  18. Giant piezoelectricity on Si for hyperactive MEMS.

    Science.gov (United States)

    Baek, S H; Park, J; Kim, D M; Aksyuk, V A; Das, R R; Bu, S D; Felker, D A; Lettieri, J; Vaithyanathan, V; Bharadwaja, S S N; Bassiri-Gharb, N; Chen, Y B; Sun, H P; Folkman, C M; Jang, H W; Kreft, D J; Streiffer, S K; Ramesh, R; Pan, X Q; Trolier-McKinstry, S; Schlom, D G; Rzchowski, M S; Blick, R H; Eom, C B

    2011-11-18

    Microelectromechanical systems (MEMS) incorporating active piezoelectric layers offer integrated actuation, sensing, and transduction. The broad implementation of such active MEMS has long been constrained by the inability to integrate materials with giant piezoelectric response, such as Pb(Mg(1/3)Nb(2/3))O(3)-PbTiO(3) (PMN-PT). We synthesized high-quality PMN-PT epitaxial thin films on vicinal (001) Si wafers with the use of an epitaxial (001) SrTiO(3) template layer with superior piezoelectric coefficients (e(31,f) = -27 ± 3 coulombs per square meter) and figures of merit for piezoelectric energy-harvesting systems. We have incorporated these heterostructures into microcantilevers that are actuated with extremely low drive voltage due to thin-film piezoelectric properties that rival bulk PMN-PT single crystals. These epitaxial heterostructures exhibit very large electromechanical coupling for ultrasound medical imaging, microfluidic control, mechanical sensing, and energy harvesting.

  19. Cell Culture on MEMS Platforms: A Review

    Science.gov (United States)

    Ni, Ming; Tong, Wen Hao; Choudhury, Deepak; Rahim, Nur Aida Abdul; Iliescu, Ciprian; Yu, Hanry

    2009-01-01

    Microfabricated systems provide an excellent platform for the culture of cells, and are an extremely useful tool for the investigation of cellular responses to various stimuli. Advantages offered over traditional methods include cost-effectiveness, controllability, low volume, high resolution, and sensitivity. Both biocompatible and bio-incompatible materials have been developed for use in these applications. Biocompatible materials such as PMMA or PLGA can be used directly for cell culture. However, for bio-incompatible materials such as silicon or PDMS, additional steps need to be taken to render these materials more suitable for cell adhesion and maintenance. This review describes multiple surface modification strategies to improve the biocompatibility of MEMS materials. Basic concepts of cell-biomaterial interactions, such as protein adsorption and cell adhesion are covered. Finally, the applications of these MEMS materials in Tissue Engineering are presented. PMID:20054478

  20. Active mems microbeam device for gas detection

    KAUST Repository

    Bouchaala, Adam M.

    2017-10-05

    Sensors and active switches for applications in gas detection and other fields are described. The devices are based on the softening and hardening nonlinear response behaviors of microelectromechanical systems (MEMS) clamped-clamped microbeams. In that context, embodiments of gas-triggered MEMS microbeam sensors and switches are described. The microbeam devices can be coated with a Metal-Organic Framework to achieve high sensitivity. For gas sensing, an amplitude-based tracking algorithm can be used to quantify an amount of gas captured by the devices according to frequency shift. Noise analysis is also conducted according to the embodiments, which shows that the microbeam devices have high stability against thermal noise. The microbeam devices are also suitable for the generation of binary sensing information for alarming, for example.

  1. Properties of bio-oil generated by a pyrolysis of forest cedar residuals with the movable Auger-type reactor

    International Nuclear Information System (INIS)

    Nishimura, Shun; Ebitani, Kohki; Miyazato, Akio

    2016-01-01

    Our research project has developed the new movable reactor for bio-oil production in 2013 on the basis of Auger-type system. This package would be a great impact due to the concept of local production for local consumption in the hilly and mountainous area in not only Japan but also in the world. Herein, we would like to report the properties of the bio-oil generated by the developing Auger-type movable reactor. The synthesized bio-oil possessed C: 46.2 wt%, H: 6.5 wt%, N: wt%, S: <0.1 wt%, O: 46.8 wt% and H 2 O: 18.4 wt%, and served a good calorific value of 18.1 MJ/kg. The spectroscopic and mass analyses such as FT-IR, GC-MS, 13 C-NMR and FT-ICR MS supported that the bio-oil was composed by the fine mixtures of methoxy phenols and variety of alcohol or carboxylic acid functional groups. Thus, it is suggested that the bio-oil generated by the new movable Auger-type reactor has a significant potential as well as the existing bio-oil reported previously

  2. Properties of bio-oil generated by a pyrolysis of forest cedar residuals with the movable Auger-type reactor

    Energy Technology Data Exchange (ETDEWEB)

    Nishimura, Shun; Ebitani, Kohki, E-mail: ebitani@jaist.ac.jp [School of Materials Science, Japan Advanced Institute of Science and Technology, 1-1 Asahidai, Nomi, Ishikawa 923-1292 (Japan); Miyazato, Akio [Nanotechnology Center, Japan Advanced Institute of Science and Technology, 1-1 Asahidai, Nomi, Ishikawa 923-1292 (Japan)

    2016-02-01

    Our research project has developed the new movable reactor for bio-oil production in 2013 on the basis of Auger-type system. This package would be a great impact due to the concept of local production for local consumption in the hilly and mountainous area in not only Japan but also in the world. Herein, we would like to report the properties of the bio-oil generated by the developing Auger-type movable reactor. The synthesized bio-oil possessed C: 46.2 wt%, H: 6.5 wt%, N: wt%, S: <0.1 wt%, O: 46.8 wt% and H{sub 2}O: 18.4 wt%, and served a good calorific value of 18.1 MJ/kg. The spectroscopic and mass analyses such as FT-IR, GC-MS, {sup 13}C-NMR and FT-ICR MS supported that the bio-oil was composed by the fine mixtures of methoxy phenols and variety of alcohol or carboxylic acid functional groups. Thus, it is suggested that the bio-oil generated by the new movable Auger-type reactor has a significant potential as well as the existing bio-oil reported previously.

  3. Investigating ESD sensitivity in electrostatic SiGe MEMS

    International Nuclear Information System (INIS)

    Sangameswaran, Sandeep; De Coster, Jeroen; Linten, Dimitri; Scholz, Mirko; Thijs, Steven; Groeseneken, Guido; De Wolf, Ingrid

    2010-01-01

    The sensitivity of electrostatically actuated SiGe microelectromechanical systems to electrostatic discharge events has been investigated in this paper. Torsional micromirrors and RF microelectromechanical systems (MEMS) actuators have been used as two case studies to perform this study. On-wafer electrostatic discharge (ESD) measurement methods, such as the human body model (HBM) and machine model (MM), are discussed. The impact of HBM ESD zap tests on the functionality and behavior of MEMS is explained and the ESD failure levels of MEMS have been verified by failure analysis. It is demonstrated that electrostatic MEMS devices have a high sensitivity to ESD and that it is essential to protect them.

  4. Review on the Modeling of Electrostatic MEMS

    Directory of Open Access Journals (Sweden)

    Wan-Chun Chuang

    2010-06-01

    Full Text Available Electrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduces the physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices.

  5. Different grades MEMS accelerometers error characteristics

    Science.gov (United States)

    Pachwicewicz, M.; Weremczuk, J.

    2017-08-01

    The paper presents calibration effects of two different MEMS accelerometers of different price and quality grades and discusses different accelerometers errors types. The calibration for error determining is provided by reference centrifugal measurements. The design and measurement errors of the centrifuge are discussed as well. It is shown that error characteristics of the sensors are very different and it is not possible to use simple calibration methods presented in the literature in both cases.

  6. Ultra-compact MEMS FTIR spectrometer

    Science.gov (United States)

    Sabry, Yasser M.; Hassan, Khaled; Anwar, Momen; Alharon, Mohamed H.; Medhat, Mostafa; Adib, George A.; Dumont, Rich; Saadany, Bassam; Khalil, Diaa

    2017-05-01

    Portable and handheld spectrometers are being developed and commercialized in the late few years leveraging the rapidly-progressing technology and triggering new markets in the field of on-site spectroscopic analysis. Although handheld devices were commercialized for the near-infrared spectroscopy (NIRS), their size and cost stand as an obstacle against the deployment of the spectrometer as spectral sensing components needed for the smart phone industry and the IoT applications. In this work we report a chip-sized microelectromechanical system (MEMS)-based FTIR spectrometer. The core optical engine of the solution is built using a passive-alignment integration technique for a selfaligned MEMS chip; self-aligned microoptics and a single detector in a tiny package sized about 1 cm3. The MEMS chip is a monolithic, high-throughput scanning Michelson interferometer fabricated using deep reactive ion etching technology of silicon-on-insulator substrate. The micro-optical part is used for conditioning the input/output light to/from the MEMS and for further light direction to the detector. Thanks to the all-reflective design of the conditioning microoptics, the performance is free of chromatic aberration. Complemented by the excellent transmission properties of the silicon in the infrared region, the integrated solution allows very wide spectral range of operation. The reported sensor's spectral resolution is about 33 cm-1 and working in the range of 1270 nm to 2700 nm; upper limited by the extended InGaAs detector. The presented solution provides a low cost, low power, tiny size, wide wavelength range NIR spectral sensor that can be manufactured with extremely high volumes. All these features promise the compatibility of this technology with the forthcoming demand of smart portable and IoT devices.

  7. Thermoelectrical Generator for a MEMS-Fuze

    OpenAIRE

    A. K. Efremov; K. V. Vlasov

    2015-01-01

    The structure of modern fuzes includes micro-electromechanical systems (MEMS), which have such advanced devices as micro-accelerometers and micro-switches, being triggered at a specified level of setback. Independent power source (PS), as an inherent part of the MEMSfuze, charges an energy storage unit during the shot and triggers the fuze firing circuit when the shell encounters the target. Operating level of the control signal should be achieved within the time of remote arming, determined ...

  8. Fractal Structures For Fixed Mems Capacitors

    KAUST Repository

    Elshurafa, Amro M.

    2014-08-28

    An embodiment of a fractal fixed capacitor comprises a capacitor body in a microelectromechanical system (MEMS) structure. The capacitor body has a first plate with a fractal shape separated by a horizontal distance from a second plate with a fractal shape. The first plate and the second plate are within the same plane. Such a fractal fixed capacitor further comprises a substrate above which the capacitor body is positioned.

  9. On the Stiction of MEMS Materials

    DEFF Research Database (Denmark)

    Zhuang, Yanxin; Menon, Aric Kumaran

    2005-01-01

    energies and stiction of commonly used MEMS materials by contact angle measurements and atomic force microscopy (AFM). Dispersive and polar components of surface energies are calculated by Owens-Wendt-Rabel-Kaelble method. Silicon and silicon-related materials have higher polar surface energies than SU-8...... been shown that the materials with higher surface energy have higher sticton/adhesion forces. The topography of surface influences the contact angle and stiction, and is also discussed in the paper....

  10. Solid polymer MEMS-based fuel cells

    Science.gov (United States)

    Jankowski, Alan F [Livermore, CA; Morse, Jeffrey D [Pleasant Hill, CA

    2008-04-22

    A micro-electro-mechanical systems (MEMS) based thin-film fuel cells for electrical power applications. The MEMS-based fuel cell may be of a solid oxide type (SOFC), a solid polymer type (SPFC), or a proton exchange membrane type (PEMFC), and each fuel cell basically consists of an anode and a cathode separated by an electrolyte layer. The electrolyte layer can consist of either a solid oxide or solid polymer material, or proton exchange membrane electrolyte materials may be used. Additionally catalyst layers can also separate the electrodes (cathode and anode) from the electrolyte. Gas manifolds are utilized to transport the fuel and oxidant to each cell and provide a path for exhaust gases. The electrical current generated from each cell is drawn away with an interconnect and support structure integrated with the gas manifold. The fuel cells utilize integrated resistive heaters for efficient heating of the materials. By combining MEMS technology with thin-film deposition technology, thin-film fuel cells having microflow channels and full-integrated circuitry can be produced that will lower the operating temperature an will yield an order of magnitude greater power density than the currently known fuel cells.

  11. The challenge of reliability in MEMS commercialization

    Energy Technology Data Exchange (ETDEWEB)

    Miller, W.M.; Tanner, D.M.; Miller, S.L.

    1998-09-01

    MicroElectroMechanical Systems (MEMS) that think, sense, act and communicate will open up a broad new array of cost-effective solutions only if MEMS is demonstrated to be sufficiently reliable. This could prove to be a major challenge if it is not addressed concurrently with technology development. There are three requirements for a valid assessment of reliability: statistical significance, identification of fundamental failure mechanisms and development of techniques for accelerating them, and valid physical models to allow prediction of failures during actual use. While these already exist for the microelectronics portion of such integrated systems, the real challenge lies in the less well-understood micromachine portions and its synergistic effects with microelectronics. This requires the elicitation of a methodology focused on MEMS reliability, which the authors discuss. A new testing and analysis infrastructure must also be developed to meet the needs of this methodology. They describe their implementation of this infrastructure and its success in addressing the three requirements for a valid reliability assessment.

  12. An Opto-MEMS Multiobject Spectrograph

    Science.gov (United States)

    Kearney, K.; Ninkov, Z.; Zwarg, D.

    2000-05-01

    Optical MEMS (Micro-Electro-Mechanical-Structures) are an enabling technology for a new class of optical instrumentation designs. An opto-MEMS device consists of an array of microfabricated structures, each of which modulates the phase and/or amplitude of an incident light beam. Typically the devices consist of an array of moveable micromirrors - each of which reflects an incident beam in a unique direction (tilt), or with a unique phase shift (piston). One widely available opto-MEMS device is the Texas Instruments' Digital Micromirror Device (DMD). The DMD is an array of 16 micron x 16 micron square mirrors postioned on a 17 micron pitch. Each mirror can tilt +/- 10 degrees from the normal - reflecting a normally incident light beam +/- 20 degrees. By positioning the DMD in an intermediate image plane in an optical system, portions of the image can be directed into- or out-of the input pupil of the follow-on imaging optics. RIT is utilizing the DMD to construct a prototype multiobject spectrograph (RIT-MOS) for visible observations with terrestrial telescopes. The DMD array replaces the input slit of an imaging spectrograph, forming a 'virtual', programmable slit assembly. By acquiring a pre-image of the astronomical field, it is possible to select a multidude of objects, and to program the DMD to pass only those objects into the input optics of the imaging spectrograph. We will report on the design and characterizatotion of the RIT-MOS, as well as preliminary imaging results.

  13. Heterogeneous MEMS device assembly and integration

    Science.gov (United States)

    Topart, Patrice; Picard, Francis; Ilias, Samir; Alain, Christine; Chevalier, Claude; Fisette, Bruno; Paultre, Jacques E.; Généreux, Francis; Legros, Mathieu; Lepage, Jean-François; Laverdière, Christian; Ngo Phong, Linh; Caron, Jean-Sol; Desroches, Yan

    2014-03-01

    In recent years, smart phone applications have both raised the pressure for cost and time to market reduction, and the need for high performance MEMS devices. This trend has led the MEMS community to develop multi-die packaging of different functionalities or multi-technology (i.e. wafer) approaches to fabricate and assemble devices respectively. This paper reports on the fabrication, assembly and packaging at INO of various MEMS devices using heterogeneous assembly at chip and package-level. First, the performance of a giant (e.g. about 3 mm in diameter), electrostatically actuated beam steering mirror is presented. It can be rotated about two perpendicular axes to steer an optical beam within an angular cone of up to 60° in vector scan mode with an angular resolution of 1 mrad and a response time of 300 ms. To achieve such angular performance relative to mirror size, the microassembly was performed from sub-components fabricated from 4 different wafers. To combine infrared detection with inertial sensing, an electroplated proof mass was flip-chipped onto a 256×1 pixel uncooled bolometric FPA and released using laser ablation. In addition to the microassembly technology, performance results of packaged devices are presented. Finally, to simulate a 3072×3 pixel uncooled detector for cloud and fire imaging in mid and long-wave IR, the staggered assembly of six 512×3 pixel FPAs with a less than 50 micron pixel co-registration is reported.

  14. A nuclear micro battery for Mems devices

    International Nuclear Information System (INIS)

    Lal, A.; Bilbao Y Leon, R.M.; Guo, H.; Li, H.; Santanam, S.; Yao, R.; Blanchard, J.; Henderson, D.

    2001-01-01

    Micro-electromechanical Systems (MEMS) have not gained wide use because they lack the on-device power required by many important applications. Several forms of energy could be considered to supply this needed power (solar, fossil fuels, etc), but nuclear sources provide an intriguing option in terms of power density and lifetime. This paper describes several approaches for establishing the viability of nuclear sources for powering realistic MEMS devices. Isotopes currently being used include alpha and low-energy beta emitters. The sources are in both solid and liquid form, and a technique for plating a solid source from a liquid source has been investigated. Several approaches are being explored for the production of MEMS power sources. The first concept is a junction-type battery. The second concept involves a more direct use of the charged particles produced by the decay: the creation of a resonator by inducing movement due to attraction or repulsion resulting from the collection of charged particles. Performance results are provided for each of these concepts. (authors)

  15. MEMS and the direct detection of exoplanets

    Science.gov (United States)

    Thomas, Sandrine J.; Macintosh, Bruce; Belikov, Ruslan

    2014-03-01

    Deformable mirrors, and particularly MEMS, are crucial components for the direct imaging of exoplanets for both ground-based and space-based instruments. Without deformable mirrors, coronagraphs are incapable of reaching contrasts required to image Jupiter-like planets. The system performance is limited by image quality degradation resulting from wavefront error introduced from multiple effects including: atmospheric turbulence, static aberrations in the system, non-common-path aberrations, all of which vary with time. Correcting for these effects requires a deformable mirror with fast response and numerous actuators having moderate stroke. Not only do MEMS devices fulfill this requirement but their compactness permits their application in numerous space- and ground-based instruments, which are often volume- and mass-limited. In this paper, I will briefly explain how coronagraphs work and their requirements. I then will discuss the Extreme Adaptive Optics needed to compensate for the introduced wavefront error and how MEMS devices are a good choice to achieve the performance needed to produce the contrasts necessary to detect exoplanets. As examples, I will discuss a facility instrument for the Gemini Observatory, called the Gemini Planet Imager, that will detect Jupiter-like planets and present recent results from the NASA Ames Coronagraph Experiment laboratory, in the context of a proposed space- based mission called EXCEDE. EXCEDE is planned to focus on protoplanetary disks.

  16. MEMS Micro-Valve for Space Applications

    Science.gov (United States)

    Chakraborty, I.; Tang, W. C.; Bame, D. P.; Tang, T. K.

    1998-01-01

    We report on the development of a Micro-ElectroMechanical Systems (MEMS) valve that is designed to meet the rigorous performance requirements for a variety of space applications, such as micropropulsion, in-situ chemical analysis of other planets, or micro-fluidics experiments in micro-gravity. These systems often require very small yet reliable silicon valves with extremely low leak rates and long shelf lives. Also, they must survive the perils of space travel, which include unstoppable radiation, monumental shock and vibration forces, as well as extreme variations in temperature. Currently, no commercial MEMS valve meets these requirements. We at JPL are developing a piezoelectric MEMS valve that attempts to address the unique problem of space. We begin with proven configurations that may seem familiar. However, we have implemented some major design innovations that should produce a superior valve. The JPL micro-valve is expected to have an extremely low leak rate, limited susceptibility to particulates, vibration or radiation, as well as a wide operational temperature range.

  17. Mechanical design control and implementation of a new movable diagnostic probe for the TRIUMF cyclotron

    International Nuclear Information System (INIS)

    Ries, T.C.

    1993-11-01

    A new movable probe has been installed into the TRIUMF H - cyclotron. It is intended to measure the distribution of betatron amplitudes, in the vertical plane, of the circulating beam and to scrape halo. The probe, however, may also be scanned in the radial direction. The head may be positioned vertically and horizontally to an accuracy of .002 in. The device is mechanically modular to facilitate fast and easy handling for maintenance in a radioactive area. The beam sensor on the probe head is a 1.25 in. x 3 in. x 0.003 in. tantalum foil and its overall coverage is 3.00 in. X 7.25 in. in a vertical plane orthogonal to, and crossing through the beam orbit plane. Presently its radial centre line location corresponds to a proton beam energy of about 430 MeV at radius 296 in., however, the probe device may be easily relocated to operate from any 4 in. port, and, with an adaptor port flange, may be installed into any port in the cyclotron vacuum tank. A stationary catcher below the probe path collects those electrons stripped from the H - beam and scattered out from the probe head. The probe axis is vertical and the tank aperture is narrow so a worm gear arrangement combined with a modified 'Evans' - parallel linkage mechanism is used to transform vertical rotary motion into horizontal linear motion. The actuators are dc servo motors with tachometers driven by pulse width modulated servo amplifiers. Position sensing is done by variable reluctance type absolute rotary encoders and the higher level positioning is performed by TRIMAC based control software. The precision of movement and jitter was measured in the laboratory. Examples will be given of the probe use with beam. (author). 5 refs., 3 figs

  18. Modern technology in originality and authentication dispute on movable and detached artworks

    Science.gov (United States)

    Tornari, Vivi; Kouloumpi, Eleni; Koussiaki, Fotini

    2013-05-01

    Begin the abstract two lines below author names and addresses. The abstract summarizes key findings in the paper. It is a paragraph of 250 words or less. For the keywords, select up to 8 key terms for a search on your manuscript's subject. Precious artworks are in constant loan due to the increase demand for tour exhibitions around the globe. Archeological findings and historical parts of wallpaintings are detached and get into the route of a fraud market. Most of these detached art pieces are lost, destroyed or hidden by public view by anonymous collectors. The damage to the historical, cultural and aesthetic values is most of the times irreversible. Originality and authentication are essential properties in the identification of movable artworks provoking dispute and fraud actions endangering the long-lasting public approach to the precious but disputed works of art. Scientific community and technology developments are implemented in the battle against fraud and misinterpretation of origin through systematic and material classified studies. European projects have influenced and provoked intense research in this fragile field of modern technology applications and recent results are presented. Investigation protocols and classification needed for the standardization of valuation of these critical properties comprise an intense field of research embraced with international interest. In this paper it is presented long-lasting research effort with photonic technologies to bridge the results with the conventional means and the conservation expert opinion aiding to the identification and ensuring the origin of a masterpiece. Results from laboratory investigation and characteristic examples of paintings faced with the dispute of their authentication are given.

  19. Inhibition of the cluster of differentiation 14 innate immunity pathway with IAXO-101 improves chronic microelectrode performance

    Science.gov (United States)

    Hermann, John K.; Ravikumar, Madhumitha; Shoffstall, Andrew J.; Ereifej, Evon S.; Kovach, Kyle M.; Chang, Jeremy; Soffer, Arielle; Wong, Chun; Srivastava, Vishnupriya; Smith, Patrick; Protasiewicz, Grace; Jiang, Jingle; Selkirk, Stephen M.; Miller, Robert H.; Sidik, Steven; Ziats, Nicholas P.; Taylor, Dawn M.; Capadona, Jeffrey R.

    2018-04-01

    Objective. Neuroinflammatory mechanisms are hypothesized to contribute to intracortical microelectrode failures. The cluster of differentiation 14 (CD14) molecule is an innate immunity receptor involved in the recognition of pathogens and tissue damage to promote inflammation. The goal of the study was to investigate the effect of CD14 inhibition on intracortical microelectrode recording performance and tissue integration. Approach. Mice implanted with intracortical microelectrodes in the motor cortex underwent electrophysiological characterization for 16 weeks, followed by endpoint histology. Three conditions were examined: (1) wildtype control mice, (2) knockout mice lacking CD14, and (3) wildtype control mice administered a small molecule inhibitor to CD14 called IAXO-101. Main results. The CD14 knockout mice exhibited acute but not chronic improvements in intracortical microelectrode performance without significant differences in endpoint histology. Mice receiving IAXO-101 exhibited significant improvements in recording performance over the entire 16 week duration without significant differences in endpoint histology. Significance. Full removal of CD14 is beneficial at acute time ranges, but limited CD14 signaling is beneficial at chronic time ranges. Innate immunity receptor inhibition strategies have the potential to improve long-term intracortical microelectrode performance.

  20. RF sputtering: A viable tool for MEMS fabrication

    Indian Academy of Sciences (India)

    In the present work, we report preparation of silicon dioxide, silicon nitride and piezoelec- tric ZnO films by RF sputtering process. The properties of these films relevant for MEMS applications have been evaluated. The application of these films in fabricating basic MEMS structures such as diaphragm, micro-cantilever beams ...

  1. Buffering Implications for the Design Space of Streaming MEMS Storage

    NARCIS (Netherlands)

    Khatib, M.G.; Abelmann, Leon; Preas, Kathy

    2011-01-01

    Emerging nanotechnology-based systems encounter new non-functional requirements. This work addresses MEMS storage, an emerging technology that promises ultrahigh density and energy-efficient storage devices. We study the buffering requirement of MEMS storage in streaming applications. We show that

  2. Shutdown Policies for MEMS-Based Storage Devices -- Analytical Models

    NARCIS (Netherlands)

    Khatib, M.G.; Engelen, Johannes Bernardus Charles; Hartel, Pieter H.

    MEMS-based storage devices should be energy ecient for deployment in mobile systems. Since MEMS-based storage devices have a moving me- dia sled, they should be shut down during periods of inactivity. However, shutdown costs energy, limiting the applicability of aggressive shutdown decisions. The

  3. Development and application of high-end aerospace MEMS

    Science.gov (United States)

    Yuan, Weizheng

    2017-12-01

    This paper introduces the design and manufacturing technology of aerospace microelectromechanical systems (MEMS) characterized by high performance, multi-variety, and small batch. Moreover, several kinds of special MEMS devices with high precision, high reliability, and environmental adaptability, as well as their typical applications in the fields of aeronautics and aerospace, are presented.

  4. Lubricated MEMS: effect of boundary slippage and texturing

    NARCIS (Netherlands)

    Tauviqirrahman, Mohammad

    2013-01-01

    Many types of micro-electro-mechanical-system (MEMS) based products are currently employed in a variety of applications. Recently, there has been an increase in the demand for higher reliability of MEMS which incorporate moving parts for each intended application. This is because the reliability of

  5. LTCC phase shifter modules for RF-MEMS-switch integration

    NARCIS (Netherlands)

    Bartnitzek, T.; Muller, E.; Dijk, R. van

    2005-01-01

    The European 1ST project ARHMS is covering a wide field of R&D activities with the final goal: a satellite based car communication system with a fiat electronically steerable roof antenna based on RF-MEMS. The required phase shift for beam steering will be done with MEMS switches and RF networks. An

  6. Nonlinear Adaptive Filter for MEMS Gyro Error Cancellation

    Data.gov (United States)

    National Aeronautics and Space Administration — Thermal biases are the dominate error in low-cost low-power small MEMS gyros. CubeSats often can't afford the power/mass to put a heater on their MEMS gyros and...

  7. Stability, Nonlinearity and Reliability of Electrostatically Actuated MEMS Devices

    Directory of Open Access Journals (Sweden)

    Di Chen

    2007-05-01

    Full Text Available Electrostatic micro-electro-mechanical system (MEMS is a special branch with a wide range of applications in sensing and actuating devices in MEMS. This paper provides a survey and analysis of the electrostatic force of importance in MEMS, its physical model, scaling effect, stability, nonlinearity and reliability in detail. It is necessary to understand the effects of electrostatic forces in MEMS and then many phenomena of practical importance, such as pull-in instability and the effects of effective stiffness, dielectric charging, stress gradient, temperature on the pull-in voltage, nonlinear dynamic effects and reliability due to electrostatic forces occurred in MEMS can be explained scientifically, and consequently the great potential of MEMS technology could be explored effectively and utilized optimally. A simplified parallel-plate capacitor model is proposed to investigate the resonance response, inherent nonlinearity, stiffness softened effect and coupled nonlinear effect of the typical electrostatically actuated MEMS devices. Many failure modes and mechanisms and various methods and techniques, including materials selection, reasonable design and extending the controllable travel range used to analyze and reduce the failures are discussed in the electrostatically actuated MEMS devices. Numerical simulations and discussions indicate that the effects of instability, nonlinear characteristics and reliability subjected to electrostatic forces cannot be ignored and are in need of further investigation.

  8. RF-MEMS capacitive switches with high reliability

    Science.gov (United States)

    Goldsmith, Charles L.; Auciello, Orlando H.; Carlisle, John A.; Sampath, Suresh; Sumant, Anirudha V.; Carpick, Robert W.; Hwang, James; Mancini, Derrick C.; Gudeman, Chris

    2013-09-03

    A reliable long life RF-MEMS capacitive switch is provided with a dielectric layer comprising a "fast discharge diamond dielectric layer" and enabling rapid switch recovery, dielectric layer charging and discharging that is efficient and effective to enable RF-MEMS switch operation to greater than or equal to 100 billion cycles.

  9. Evaluation of carbon nanotube fiber microelectrodes for neurotransmitter detection: Correlation of electrochemical performance and surface properties.

    Science.gov (United States)

    Yang, Cheng; Trikantzopoulos, Elefterios; Jacobs, Christopher B; Venton, B Jill

    2017-05-01

    Fibers made of CNTs are attractive microelectrode sensors because they can be directly fabricated into microelectrodes. Different protocols for making CNT fibers have been developed, but differences in surface structure and therefore electrochemical properties that result have not been studied. In this study, we correlated the surface and electrochemical properties for neurochemical detection at 3 types of materials: CNT fibers produced by wet spinning with (1) polyethylenimine (PEI/CNT) or (2) chlorosulfonic acid (CA/CNT), and (3) CNT yarns made by solid-based CNT drawing. CNT yarns had well-aligned, high purity CNTs, abundant oxygen functional groups, and moderate surface roughness which led to the highest dopamine current density (290 ± 65 pA/cm 2 ) and fastest electron transfer kinetics. The crevices of the CNT yarn and PEI/CNT fiber microelectrodes allow dopamine to be momentarily trapped during fast-scan cyclic voltammetry detection, leading to thin-layer cell conditions and a response that was independent of applied waveform frequency. The larger crevices on the PEI/CNT fibers led to a slower time response, showing too much roughness is detrimental to fast detection. CA/CNT fibers have a smoother surface and lower currents, but their negative surface charge results in high selectivity for dopamine over uric acid or ascorbic acid. Overall, small crevices, high conductivity, and abundant oxygen groups led to high sensitivity for amine neurotransmitters, such as dopamine and serotonin. Thus, different surfaces of CNT fibers result in altered electrochemical properties and could be used in the future to predict and control electrochemical performance. Copyright © 2017 Elsevier B.V. All rights reserved.

  10. Modeling microelectrode biosensors: free-flow calibration can substantially underestimate tissue concentrations.

    Science.gov (United States)

    Newton, Adam J H; Wall, Mark J; Richardson, Magnus J E

    2017-03-01

    Microelectrode amperometric biosensors are widely used to measure concentrations of analytes in solution and tissue including acetylcholine, adenosine, glucose, and glutamate. A great deal of experimental and modeling effort has been directed at quantifying the response of the biosensors themselves; however, the influence that the macroscopic tissue environment has on biosensor response has not been subjected to the same level of scrutiny. Here we identify an important issue in the way microelectrode biosensors are calibrated that is likely to have led to underestimations of analyte tissue concentrations. Concentration in tissue is typically determined by comparing the biosensor signal to that measured in free-flow calibration conditions. In a free-flow environment the concentration of the analyte at the outer surface of the biosensor can be considered constant. However, in tissue the analyte reaches the biosensor surface by diffusion through the extracellular space. Because the enzymes in the biosensor break down the analyte, a density gradient is set up resulting in a significantly lower concentration of analyte near the biosensor surface. This effect is compounded by the diminished volume fraction (porosity) and reduction in the diffusion coefficient due to obstructions (tortuosity) in tissue. We demonstrate this effect through modeling and experimentally verify our predictions in diffusive environments. NEW & NOTEWORTHY Microelectrode biosensors are typically calibrated in a free-flow environment where the concentrations at the biosensor surface are constant. However, when in tissue, the analyte reaches the biosensor via diffusion and so analyte breakdown by the biosensor results in a concentration gradient and consequently a lower concentration around the biosensor. This effect means that naive free-flow calibration will underestimate tissue concentration. We develop mathematical models to better quantify the discrepancy between the calibration and tissue

  11. Real-time analysis for Stochastic errors of MEMS gyro

    Science.gov (United States)

    Miao, Zhiyong; Shi, Hongyang; Zhang, Yi

    2017-10-01

    Since a good knowledge of MEMS gyro stochastic errors is important and critical to MEMS INS/GPS integration system. Therefore, the stochastic errors of MEMS gyro should be accurately modeled and identified. The Allan variance method is IEEE standard method in the filed of analysis stochastic errors of gyro. This kind of method can fully characterize the random character of stochastic errors. However, it requires a large amount of data to be stored, resulting in large offline computational burden. Moreover, it has a painful procedure of drawing slope lines for estimation. To overcome the barriers, a simple linear state-space model was established for MEMS gyro. Then, a recursive EM algorithm was implemented to estimate the stochastic errors of MEMS gyro in real time. The experimental results of ADIS16405 IMU show that the real-time estimations of proposed approach are well within the error limits of Allan variance method. Moreover, the proposed method effectively avoids the storage of data.

  12. Using MEMS Capacitive Switches in Tunable RF Amplifiers

    Directory of Open Access Journals (Sweden)

    Danson John

    2006-01-01

    Full Text Available A MEMS capacitive switch suitable for use in tunable RF amplifiers is described. A MEMS switch is designed, fabricated, and characterized with physical and RF measurements for inclusion in simulations. Using the MEMS switch models, a dual-band low-noise amplifier (LNA operating at GHz and GHz, and a tunable power amplifier (PA at GHz are simulated in m CMOS. MEMS switches allow the LNA to operate with 11 dB of isolation between the two bands while maintaining dB of gain and sub- dB noise figure. MEMS switches are used to implement a variable matching network that allows the PA to realize up to 37% PAE improvement at low input powers.

  13. Novel 3D microelectrodes and pipettes by wet and dry etching

    DEFF Research Database (Denmark)

    Dimaki, Maria; Vazquez, Patricia; Aimone, Alessandro

    2012-01-01

    in order to confirm their functionality. Although functional, an increase in the electrode surface area is needed if they are to be used for electrophysiological measurements. Finally, the pipettes fabricated have openings of the order of 500nm, which makes them ideal candidates for localised stimulation...... for localised measurements on cell cultures and high aspect ratio scalloped microelectrodes for measurements in brain slices. This paper presents improved fabrication processes for both types of electrodes and the pipettes, as well as the electrical and electrochemical characterization of the small electrodes...

  14. Electrohydrodynamic actuation of co-flowing liquids by means of microelectrode arrays

    Energy Technology Data Exchange (ETDEWEB)

    Garcia-Sanchez, Pablo; Ferney, Mathieu; Ramos, Antonio, E-mail: pablogarcia@us.es [Depto. de Electronica y Electromagnetismo, University of Sevilla (Spain)

    2011-06-23

    Electric fields induce forces at the interface between liquids with different electrical properties (conductivity and/or permittivity). We explore how to use these forces for manipulating two coflowing streams of liquids in a microchannel. A microelectrode array is fabricated at the bottom of the channel and one of the two liquids is labelled with a fluorescent dye for observing the phenomenon. The diffuse interface between the two liquids is deflected depending on the ac signal and conductivity (or permittivity) ratio between the liquids. Only a few volts are needed for observing the interface destabilization, in contrast with other electrode configurations where hundreds of volts are applied.

  15. Optimization of Microelectrode Recording in Deep Brain Stimulation Surgery Using Intraoperative Computed Tomography.

    Science.gov (United States)

    Kochanski, Ryan B; Bus, Sander; Pal, Gian; Metman, Leo Verhagen; Sani, Sepehr

    2017-07-01

    Microelectrode recording (MER) is used to confirm targeting accuracy during deep brain stimulation (DBS) surgery. We describe a technique using intraoperative computed tomography (CT) extrapolation (iCTE) to predetermine and adjust the trajectory of the guide tube to improve microelectrode targeting accuracy. We hypothesized that this technique would decrease the number of MER tracks and operative time, while increasing the recorded length of the subthalamic nucleus (STN). Thirty-nine patients with Parkinson's disease who underwent STN DBS before the iCTE method were compared with 33 patients undergoing STN DBS using iCTE. Before dural opening, a guide tube was inserted and rested on dura. Intraoperative computed tomography (iCT) was performed, and a trajectory was created along the guide tube and extrapolated to the target using targeting software. If necessary, headstage adjustments were made to correct for error. The guide tube was inserted, and MER was performed. iCT was performed with the microelectrode tip at the target. Coordinates were compared with planned/adjusted track coordinates. Radial error between the MER track and the planned/adjusted track was calculated. Cases before and after implementation of iCTE were compared to determine the impact of iCTE on operative time, number of MER tracks and recorded STN length. The use of iCTE reduced the average radial MER track error from 1.90 ± 0.12 mm (n = 54) to 0.84 ± 0.09 mm (n = 49) (P < 0.001) while reducing the operative time for bilateral lead placement from 272 ± 9 minutes (n = 30) to 233 ± 10 minutes (n = 24) (P < 0.001). The average MER tracks per hemisphere was reduced from 2.24 ± 0.13 mm (n = 66) to 1.75 ± 0.09 mm (n = 63) (P < 0.001), whereas the percentage of hemispheres requiring a single MER track for localization increased from 29% (n = 66) to 43% (n = 63). The average length of recorded STN increased from 4.01 ± 0.3 mm (n = 64) to 4.75 ± 0.28 mm (n = 56) (P < 0.05). i

  16. Novel carbon-fiber microelectrode batch fabrication using a 3D-printed mold and polyimide resin.

    Science.gov (United States)

    Trikantzopoulos, Elefterios; Yang, Cheng; Ganesana, Mallikarjunarao; Wang, Ying; Venton, B Jill

    2016-09-21

    Glass insulated carbon-fiber microelectrodes (CFMEs) are standard tools for the measurement of neurotransmitters. However, electrodes are fabricated individually and the glass can shatter, limiting application in higher order mammals. Here, we developed a novel microelectrode batch fabrication method using a 3D-printed mold and polyimide resin insulating agent. The 3D-printed mold is low cost, customizable to change the electrode shape, and allows 40 electrodes to be made simultaneously. The polyimide resin is biocompatible, quick to cure, and does not adhere to the plastic mold. The electrodes were tested for the response to dopamine with fast-scan cyclic voltammetry both in vitro and in vivo and performed similarly to traditional glass-insulated electrodes, but with lower background currents. Thus, polyimide-insulated electrodes can be mass-produced using a 3D-printed mold and are an attractive alternative for making cheap, biocompatible microelectrodes.

  17. A nuclear micro battery for Mems devices

    International Nuclear Information System (INIS)

    Blanchard, J.; Lal, A.; Henderson, D.; Bilbao Y Leon, R.; Guo, H.; Li, H.; Santanam, S.; Yao, R.

    2001-01-01

    Micro-electromechanical Systems (MEMS) have not gained wide use because they lack the on-device power required by many important applications. Several forms of energy could be considered to supply this needed power (solar, fossil fuels, etc), but nuclear sources provide an intriguing option in terms of power density and lifetime. This paper describes several approaches for establishing the viability of nuclear sources for powering realistic MEMS devices. Isotopes currently being used include low-energy beta emitters (solid and liquid) and alpha emitters (solid). Several approaches are being explored for the production of MEMS power sources. The first concept is a junction-type battery. In this case, the charged particles emitted from the decay of the radioisotopes are absorbed by a semiconductor and dissipate most of their energy as ionization of the atoms in the solid. The carriers generated in this fashion are in excess of the number permitted by thermodynamic equilibrium and, if they diffuse to the vicinity of a rectifying junction, induce a voltage across the junction. The second concept involves a more direct use of the charged particles produced by the decay: the creation of a resonator by inducing movement due to attraction or repulsion resulting from the collection of charged particles. As the charge is collected, the deflection of a cantilever beam increases until it contacts a grounded element, thus discharging the beam and causing it to return to its original position. This process will repeat as long as the source is active. One final concept relies on temperature gradients produced by the sources, along with appropriate insulation, to create power using a Peltier device. The source is isolated in order to allow it to reach sufficient temperatures, and the temperature difference between the source and the rest of the device is exploited using the Peltier effect. Performance results will be provided for each of these concepts. (author)

  18. The Registration of Special Notarial Bonds under the Security by Means of Movable Property Act and the Publicity Principle: Lessons from Developments in Belgium

    Directory of Open Access Journals (Sweden)

    Lefa

    2018-01-01

    Full Text Available Many people do not own immovable property to offer as security but do have movable property which can be offered as security for the repayment of a debt. In today's world, where the costs of a motor car can exceed that of a house, the increasing value of movable things makes them popular and appropriate security objects. Under the common law pledge, delivery of the movable property from the pledgor (the debtor to the pledgee (the creditor has to take place in order for the pledgee to acquire a real security right in the property. Delivery of the property is aimed at ensuring compliance with the publicity principle. The principle of publicity entails that the existence of a real security must be known to the public. With the aim of promoting commerce, certain countries have taken the initiative in reforming their laws on pledge to allow the debtor to retain possession of the movable property that serves as security. Furthermore, technology has advanced to a level where national registration systems which can be accessed easily and at minimal cost can be established. The South African legislature enacted the Security by Means of Movable Property Act 57 of 1993 which makes provision for a pledge without possession. This Act deemed a duly registered notarial bond over specified movable property to have been delivered as if delivery had in fact taken place, thereby substituting the common law delivery requirement with registration in the Deeds Office. On 30 May 2013 the Belgian House of Representatives adopted a Belgian Pledge Act which allows for a non-possessory pledge on movable property subject to registration in a newly created public register called the Electronic Pledge Register. This article therefore examines the efficacy of the registration system of special notarial bonds in South African law and whether this form of registration complies with the publicity principle looking at the developments of a computerised registration system taking

  19. Using MEMS mirrors to pattern electrical forces

    Science.gov (United States)

    Neale, Steven L.; Hsu, Hsan-Yin; Valley, Justin K.; Jamshidi, Arash; Wu, Ming C.

    2009-02-01

    By switching between two tilt angles MEMS mirrors can be used to produce spatial light patterns. This enables the Digital Micromirror Display (DMD, Texas Instruments) chip to produce the images found in some data projectors. In this paper we will show how these images can be converted into electrical patterns. We use the electrical gradients in these patterns to control the movement of particles through dielectrophoresis. We show how this can be used to move cells within PBS solution and characterize our device. We also discuss possible ways to improve our optical setup through Adaptive Optics (AO).

  20. MEMS-Reconfigurable Metamaterials and Antenna Applications

    Directory of Open Access Journals (Sweden)

    Tomislav Debogovic

    2014-01-01

    Full Text Available This paper reviews some of our contributions to reconfigurable metamaterials, where dynamic control is enabled by microelectromechanical systems (MEMS technology. First, we show reconfigurable composite right-/left-handed transmission lines (CRLH-TLs having state of the art phase velocity variation and loss, thereby enabling efficient reconfigurable phase shifters and leaky-wave antennas (LWA. Second, we present very low loss metasurface designs with reconfigurable reflection properties, applicable in reflectarrays and partially reflective surface (PRS antennas. All the presented devices have been fabricated and experimentally validated. They operate in X- and Ku-bands.

  1. Prospects for MEMS in the Automotive Industry

    Directory of Open Access Journals (Sweden)

    Richard DIXON

    2007-12-01

    Full Text Available An automotive sector as a growth market for MEMS sensors is analyzed in the article. The automotive sector accounted for $1.6 billion, making this the second biggest opportunity after IT peripherals and inkjet print heads. By 2011 the market will top $2.2 billion, a CAGR of around 7%. The main applications in revenues terms are, in order, pressure sensors, gyroscopes, accelerometers and flow sensors and this will remain so for the foreseeable future. Automotive companies are forced to innovate as a result of competition and price pressures.

  2. MEMS-BASED 3D CONFOCAL SCANNING MICROENDOSCOPE USING MEMS SCANNERS FOR BOTH LATERAL AND AXIAL SCAN.

    Science.gov (United States)

    Liu, Lin; Wang, Erkang; Zhang, Xiaoyang; Liang, Wenxuan; Li, Xingde; Xie, Huikai

    2014-08-15

    A fiber-optic 3D confocal scanning microendoscope employing MEMS scanners for both lateral and axial scan was designed and constructed. The MEMS 3D scan engine achieved a lateral scan range of over ± 26° with a 2D MEMS scanning micromirror and a depth scan of over 400 μm with a 1D MEMS tunable microlens. The lateral resolution and axial resolution of this system were experimentally measured as 1.0 μm and 7.0 μm, respectively. 2D and 3D confocal reflectance images of micro-patterns, micro-particles, onion skins and acute rat brain tissue were obtained by this MEMS-based 3D confocal scanning microendoscope.

  3. Study of technical and economical feasibility for implementation of a movable unit for treatment of industrial effluents with electron beam

    International Nuclear Information System (INIS)

    Rela, Carolina Sciamarelli

    2006-01-01

    The treatment of industrial effluents is a practice that is disseminating in accelerated rhythm, of contributing to reinforce the public image, through the combat of the pollution, it brings economical advantages allowing the companies the reuse of the treated water in their own processes. The liquid effluent treatment technique studied in the present work is the one that uses the chemical oxidation/reduction standing out the use of the electron beam (e.b.) radiation. This technique uses an advanced oxidation process, generating radicals highly reagents that provoke the oxidation, reduction, dissociation and degradation in composed organic and exercising lethal effect in general in the microorganisms and parasites. In this work a conceptual and basic project of a movable unit of effluents treatment using electron beam radiation process was developed, in order that the unit moves until the treatment point, where the effluent is produced, facilitating the logistics. A technical and economical feasibility study was also elaborated allowing data on the capacity and cost of effluents processing to consolidate the values of the necessary investments to be presented to foundations organs for the construction of a movable unit. The results of the studies demonstrated that it is technically viable attending the pertinent legislation of Brazil, in the aspects of Radiation Protection and transport limit capacity. The unitary cost of the e.b. radiation processing in the movable unit was shown more expensive than in the fixed unit, the reason is the decrease of the efficiency of the interaction of the incident electrons in the effluent, due to the reduction of electron energy operation time of the unit. (author)

  4. A simple implantation method for flexible, multisite microelectrodes into rat brains

    Directory of Open Access Journals (Sweden)

    Anja eRichter

    2013-07-01

    Full Text Available A long term functional and reliable coupling between neural tissue and implanted microelectrodes is the key issue in acquiring neural electrophysiological signals or therapeutically excite neural tissue. The currently often used rigid micro-electrodes are thought to cause a severe foreign body reaction resulting in a thick glial scar and consequently a poor tissue-electrode coupling in the chronic phase. We hypothesize, that this adverse effect might be remedied by probes compliant to the soft brain tissue, i.e. replacing rigid electrodes by flexible ones. Unfortunately, this flexibility comes at the price of a low stiffness, which makes targeted low trauma implantation very challenging. In this study, we demonstrate an adaptable and simple method to implant extremely flexible microprobes even to deep areas of rat’s brain. Implantation of flexible probes is achieved by rod supported stereotactic insertion fostered by a hydrogel (2% agarose in PBS cushion on the exposed skull. We were thus able to implant very flexible micro-probes in 70 rats as deep as the rodent's subthalamic nucleus. This work describes in detail the procedures and steps needed for minimal invasive, but reliable implantation of flexible probes.

  5. Microfabrication, characterization and in vivo MRI compatibility of diamond microelectrodes array for neural interfacing.

    Science.gov (United States)

    Hébert, Clément; Warnking, Jan; Depaulis, Antoine; Garçon, Laurie Amandine; Mermoux, Michel; Eon, David; Mailley, Pascal; Omnès, Franck

    2015-01-01

    Neural interfacing still requires highly stable and biocompatible materials, in particular for in vivo applications. Indeed, most of the currently used materials are degraded and/or encapsulated by the proximal tissue leading to a loss of efficiency. Here, we considered boron doped diamond microelectrodes to address this issue and we evaluated the performances of a diamond microelectrode array. We described the microfabrication process of the device and discuss its functionalities. We characterized its electrochemical performances by cyclic voltammetry and impedance spectroscopy in saline buffer and observed the typical diamond electrode electrochemical properties, wide potential window and low background current, allowing efficient electrochemical detection. The charge storage capacitance and the modulus of the electrochemical impedance were found to remain in the same range as platinum electrodes used for standard commercial devices. Finally we observed a reduced Magnetic Resonance Imaging artifact when the device was implanted on a rat cortex, suggesting that boron doped-diamond is a very promising electrode material allowing functional imaging. Copyright © 2014 Elsevier B.V. All rights reserved.

  6. Titanium-based multi-channel, micro-electrode array for recording neural signals.

    Science.gov (United States)

    McCarthy, Patrick T; Madangopal, Rajtarun; Otto, Kevin J; Rao, Masaru P

    2009-01-01

    Micro-scale brain-machine interface (BMI) devices have provided an opportunity for direct probing of neural function and have also shown significant promise for restoring neurological functions lost to stroke, injury, or disease. However, the eventual clinical translation of such devices may be hampered by limitations associated with the materials commonly used for their fabrication, e.g. brittleness of silicon, insufficient rigidity of polymeric devices, and unproven chronic biocompatibility of both. Herein, we report, for the first time, the development of titanium-based "Michigan" type multi-channel, microelectrode arrays that seek to address these limitations. Titanium provides unique properties of immediate relevance to microelectrode arrays, such as high toughness, moderate modulus, and excellent biocompatibility, which may enhance structural reliability, safety, and chronic recording reliability. Realization of these devices is enabled by recently developed techniques which provide the opportunity for fabrication of high aspect ratio micromechanical structures in bulk titanium substrates. Details regarding the design, fabrication, and characterization of these devices for eventual use in rat auditory cortex and thalamus recordings are presented, as are preliminary results.

  7. Three-dimensional micro-electrode array for recording dissociated neuronal cultures.

    Science.gov (United States)

    Musick, Katherine; Khatami, David; Wheeler, Bruce C

    2009-07-21

    This work demonstrates the design, fabrication, packaging, characterization, and functionality of an electrically and fluidically active three-dimensional micro-electrode array (3D MEA) for use with neuronal cell cultures. The successful function of the device implies that this basic concept-construction of a 3D array with a layered approach-can be utilized as the basis for a new family of neural electrode arrays. The 3D MEA prototype consists of a stack of individually patterned thin films that form a cell chamber conducive to maintaining and recording the electrical activity of a long-term three-dimensional network of rat cortical neurons. Silicon electrode layers contain a polymer grid for neural branching, growth, and network formation. Along the walls of these electrode layers lie exposed gold electrodes which permit recording and stimulation of the neuronal electrical activity. Silicone elastomer micro-fluidic layers provide a means for loading dissociated neurons into the structure and serve as the artificial vasculature for nutrient supply and aeration. The fluidic layers also serve as insulation for the micro-electrodes. Cells have been shown to survive in the 3D MEA for up to 28 days, with spontaneous and evoked electrical recordings performed in that time. The micro-fluidic capability was demonstrated by flowing in the drug tetrotodoxin to influence the activity of the culture.

  8. Impedance Immunsensor Based on Interdigitated Array Microelectrode and its Experiment Parameter Optimization

    Directory of Open Access Journals (Sweden)

    Wen Ping Zhao

    2014-05-01

    Full Text Available This article accounts for a novel impedance immunosensor based on the specificity reaction of the antigen-antibody and the sensitivity of the interdigitated array microelectrode (IDAM for the determination of chlorpyrifos residues. The basic knowledge of immunoassay was in relation to its IDAM electrode surface modification, antibody immobilization, bovine serum albumin (BSA blocking and sample detection. The SPA was dropped onto the surface of IDAM electrode, used for binding antibody Fc fragments. Next, antibody was immobilized on the SPA modified electrode. Finally, BSA was employed to block the possible remaining active sites avoiding any nonspecific adsorption. Target chlorpyrifos was then captured by the immobilized antibody, resulting in a change in the impedance of the IDAM microelectrode surface. The fabrication procedure of the immunosensor and the sample detection were characterized by electrochemical impedance spectroscopy (EIS. The influences of the experiment parameters were investigated. Under optimized conditions, an excellent biosensor was fabricated. Many of the antibodies, enzymes and other reagents integral to immunoassays were very expensive, often hundreds of dollars per milligram, therefore miniaturization reduces reagent costs drastically. In this article the volume of the reagents was micro upgrade, the antibodies, SPA and BSA were 30 mL, the chlorpyrifos sample and detection solution were 50mL. The advantages of the immunosensor were exhibited in its better specificity, stability, selectivity and regeneration. The proposed method was proven to be a feasible quantitative method for chlorpyrifos analysis in vegetables and fruits.

  9. Electrochemical detection of peroxynitrite using hemin-PEDOT functionalized boron-doped diamond microelectrode.

    Science.gov (United States)

    Peteu, Serban F; Whitman, Brandon W; Galligan, James J; Swain, Greg M

    2016-03-07

    Peroxynitrite is a potent nitroxidation agent and highly reactive metabolite, clinically correlated with a rich pathophysiology. Its sensitive and selective detection is challenging due to its high reactivity and short sub-second lifetime. Boron-doped diamond (BDD) microelectrodes have attracted interest because of their outstanding electroanalytical properties that include a wide working potential window and enhanced signal-to-noise ratio. Herein, we report on the modification of a BDD microelectrode with an electro-polymerized film of hemin and polyethylenedioxythiophene (PEDOT) for the purpose of selectively quantifying peroxynitrite. The nanostructured modified polymer layer was characterized by Raman spectroscopy and scanning electron microscopy (SEM). The electrochemical response to peroxynitrite was studied by voltammetry and time-based amperometry. The measured detection limit was 10 ± 0.5 nM (S/N = 3), the sensitivity was 4.5 ± 0.5 nA nM(-1) and the response time was 3.5 ± 1 s. The hemin-PEDOT BDD sensors exhibited a response variability of 5% or less (RSD). The stability of the sensors after a 20-day storage in 0.1 M PB (pH 7.4) at 4 °C was excellent as at least 93% of the initial response to 50 nM PON was maintained. The presence of PEDOT was correlated with a sensitivity increase.

  10. Voltammetric studies on the electrochemical determination of methylmercury in chloride medium at carbon microelectrodes

    International Nuclear Information System (INIS)

    Ribeiro, F.; Neto, M.M.M.; Rocha, M.M.; Fonseca, I.T.E.

    2006-01-01

    Electroanalytical techniques have been used to determine methylmercury at low levels in environmental matrices. The electrochemical behaviour of methylmercury at carbon microelectrodes in a hydrochloric acid medium using cyclic, square wave and fast-scan linear-sweep voltammetric techniques has been investigated. The analytical utility of the methylmercury reoxidation peak has been explored, but the recorded peak currents were found to be poorly reproducible. This is ascribed to two factors: the adsorption of insoluble chloromercury compounds on the electrode surface, which appears to be an important contribution to hinder the voltammetric signal of methylmercury; and the competition between the reoxidation of the methylmercury radical and its dimerization reaction, which limits the reproducibility of the methylmercury peak. These problems were successfully overcome by adopting the appropriate experimental conditions. Fast-scan rates were employed and an efficient electrochemical regeneration procedure of the electrode surface was achieved, under potentiostatic conditions in a mercury-free solution containing potassium thiocyanate-a strong complexing agent. The influence of chloride ion concentration was analysed. Interference by metals, such as lead and cadmium, was considered. Calibration plots were obtained in the micromolar and submicromolar concentration ranges, allowing the electrochemical determination of methylmercury in trace amounts. An estuarine water sample was analysed using the new method with a glassy carbon microelectrode

  11. Flexible polyimide microelectrode array for in vivo recordings and current source density analysis.

    Science.gov (United States)

    Cheung, Karen C; Renaud, Philippe; Tanila, Heikki; Djupsund, Kaj

    2007-03-15

    This work presents implantable, flexible polymer-based probes with embedded microelectrodes for acute and chronic neural recordings in vivo, as tested on rodents. Acute recordings using this array were done in mice under urethane anesthesia and compared to those made using silicon-based probes manufactured at the Center for Neural Communication Technology, University of Michigan. The two electrode arrays yielded similar results. Recordings with chronically implanted polymer-based electrodes were performed for 60 days post-surgically in awake, behaving rats. The microelectrodes were used to monitor local field potentials and capture laminar differences in function of cortex and hippocampus, and produced response waveforms of undiminished amplitude and signal-to-noise ratios 8 weeks after chronic implantation. The polymer-based electrodes could also be connected to a lesion current to mark specific locations in the tissue. Current source density (CSD) analysis from the recordings depicted a source - sink-composition. Tissue response was assessed 8 weeks after insertion by immunochemical labeling with glial fibrillary acidic protein (GFAP) to identify astrocytes, and histological analysis showed minimal tissue reaction to the implanted structures.

  12. MEMS mass-spring-damper systems using an out-of-plane suspension scheme

    KAUST Repository

    Abdel Aziz, Ahmed Kamal Said

    2014-02-04

    MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) using an out-of-plane (or vertical) suspension scheme, wherein the suspensions are normal to the proof mass, are disclosed. Such out-of-plane suspension scheme helps such MEMS mass-spring-damper systems achieve inertial grade performance. Methods of fabricating out-of-plane suspensions in MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) are also disclosed.

  13. MEMS Integrated Submount Alignment for Optoelectronics

    Science.gov (United States)

    Shakespeare, W. Jeffrey; Pearson, Raymond A.; Grenestedt, Joachim L.; Hutapea, Parsaoran; Gupta, Vikas

    2005-02-01

    One of the most expensive and time-consuming production processes for single-mode fiber-optic components is the alignment of the photonic chip or waveguide to the fiber. The alignment equipment is capital intensive and usually requires trained technicians to achieve desired results. Current technology requires active alignment since tolerances are only ~0.2 μ m or less for a typical laser diode. This is accomplished using piezoelectric actuated stages and active optical feedback. Joining technologies such as soldering, epoxy bonding, or laser welding may contribute significant postbond shift, and final coupling efficiencies are often less than 80%. This paper presents a method of adaptive optical alignment to freeze in place directly on an optical submount using a microelectromechanical system (MEMS) shape memory alloy (SMA) actuation technology. Postbond shift is eliminated since the phase change is the alignment actuation. This technology is not limited to optical alignment but can be applied to a variety of MEMS actuations, including nano-actuation and nano-alignment for biomedical applications. Experimental proof-of-concept results are discussed, and a simple analytical model is proposed to predict the stress strain behavior of the optical submount. Optical coupling efficiencies and alignment times are compared with traditional processes. The feasibility of this technique in high-volume production is discussed.

  14. Frequency adjustable MEMS vibration energy harvester

    Science.gov (United States)

    Podder, P.; Constantinou, P.; Amann, A.; Roy, S.

    2016-10-01

    Ambient mechanical vibrations offer an attractive solution for powering the wireless sensor nodes of the emerging “Internet-of-Things”. However, the wide-ranging variability of the ambient vibration frequencies pose a significant challenge to the efficient transduction of vibration into usable electrical energy. This work reports the development of a MEMS electromagnetic vibration energy harvester where the resonance frequency of the oscillator can be adjusted or tuned to adapt to the ambient vibrational frequency. Micro-fabricated silicon spring and double layer planar micro-coils along with sintered NdFeB micro-magnets are used to construct the electromagnetic transduction mechanism. Furthermore, another NdFeB magnet is adjustably assembled to induce variable magnetic interaction with the transducing magnet, leading to significant change in the spring stiffness and resonance frequency. Finite element analysis and numerical simulations exhibit substantial frequency tuning range (25% of natural resonance frequency) by appropriate adjustment of the repulsive magnetic interaction between the tuning and transducing magnet pair. This demonstrated method of frequency adjustment or tuning have potential applications in other MEMS vibration energy harvesters and micromechanical oscillators.

  15. Frequency adjustable MEMS vibration energy harvester

    International Nuclear Information System (INIS)

    Podder, P; Constantinou, P; Roy, S; Amann, A

    2016-01-01

    Ambient mechanical vibrations offer an attractive solution for powering the wireless sensor nodes of the emerging “Internet-of-Things”. However, the wide-ranging variability of the ambient vibration frequencies pose a significant challenge to the efficient transduction of vibration into usable electrical energy. This work reports the development of a MEMS electromagnetic vibration energy harvester where the resonance frequency of the oscillator can be adjusted or tuned to adapt to the ambient vibrational frequency. Micro-fabricated silicon spring and double layer planar micro-coils along with sintered NdFeB micro-magnets are used to construct the electromagnetic transduction mechanism. Furthermore, another NdFeB magnet is adjustably assembled to induce variable magnetic interaction with the transducing magnet, leading to significant change in the spring stiffness and resonance frequency. Finite element analysis and numerical simulations exhibit substantial frequency tuning range (25% of natural resonance frequency) by appropriate adjustment of the repulsive magnetic interaction between the tuning and transducing magnet pair. This demonstrated method of frequency adjustment or tuning have potential applications in other MEMS vibration energy harvesters and micromechanical oscillators. (paper)

  16. Piezoelectric Zinc Oxide Based MEMS Acoustic Sensor

    Directory of Open Access Journals (Sweden)

    Aarti Arora

    2008-04-01

    Full Text Available An acoustic sensors exhibiting good sensitivity was fabricated using MEMS technology having piezoelectric zinc oxide as a dielectric between two plates of capacitor. Thin film zinc oxide has structural, piezoelectric and optical properties for surface acoustic wave (SAW and bulk acoustic wave (BAW devices. Oxygen effficient films are transparent and insulating having wide applications for sensors and transducers. A rf sputtered piezoelectric ZnO layer transforms the mechanical deflection of a thin etched silicon diaphragm into a piezoelectric charge. For 25-micron thin diaphragm Si was etched in tetramethylammonium hydroxide solution using bulk micromachining. This was followed by deposition of sandwiched structure composed of bottom aluminum electrode, sputtered 3 micron ZnO film and top aluminum electrode. A glass having 1 mm diameter hole was bonded on backside of device to compensate sound pressure in side the cavity. The measured value of central capacitance and dissipation factor of the fabricated MEMS acoustic sensor was found to be 82.4pF and 0.115 respectively, where as the value of ~176 pF was obtained for the rim capacitance with a dissipation factor of 0.138. The response of the acoustic sensors was reproducible for the devices prepared under similar processing conditions under different batches. The acoustic sensor was found to be working from 30Hz to 8KHz with a sensitivity of 139µV/Pa under varying acoustic pressure.

  17. The Development of the Differential MEMS Vector Hydrophone.

    Science.gov (United States)

    Zhang, Guojun; Liu, Mengran; Shen, Nixin; Wang, Xubo; Zhang, Wendong

    2017-06-08

    To solve the problem that MEMS vector hydrophones are greatly interfered with by the vibration of the platform and flow noise in applications, this paper describes a differential MEMS vector hydrophone that could simultaneously receive acoustic signals and reject acceleration signals. Theoretical and simulation analyses have been carried out. Lastly, a prototype of the differential MEMS vector hydrophone has been created and tested using a standing wave tube and a vibration platform. The results of the test show that this hydrophone has a high sensitivity, M v = -185 dB (@ 500 Hz, 0 dB reference 1 V/μPa), which is almost the same as the previous MEMS vector hydrophones, and has a low acceleration sensitivity, M v = -58 dB (0 dB reference 1 V/g), which has decreased by 17 dB compared with the previous MEMS vector hydrophone. The differential MEMS vector hydrophone basically meets the requirements of acoustic vector detection when it is rigidly fixed to a working platform, which lays the foundation for engineering applications of MEMS vector hydrophones.

  18. Shifting the Intertial Navigation Paradigm with the MEMS Technology

    Science.gov (United States)

    Crain, Timothy P., II; Bishop, Robert H.; Brady, Tye

    2010-01-01

    "Why don't you use MEMS?" is of the most common questions posed to navigation systems engineers designing inertial navigation solutions in the modern era. The question stems from a general understanding that great strides have been made in terrestrial MEMS accelerometers and attitude rate sensors in terms of accuracy, mass, and power. Yet, when compared on a unit-to-unit basis, MEMS devices do not provide comparable performance (accuracy) to navigation grade sensors in several key metrics. This paper will propose a paradigm shift where the comparison in performance is between multiple MEMS devices and a single navigation grade sensor. The concept is that systematically, a sufficient number of MEMS sensors may mathematically provide comparable performance to a single navigation grade device and be competitive in terms power and mass allocations when viewed on a systems level. The implication is that both inertial navigation system design and fault detection, identification, and recovery could benefit from a system of MEMS devices in the same way that swarm sensing has benefited Earth observation and astronomy. A survey of the state of the art in inertial sensor accuracy scaled by mass and power will be provided to show the scaled error in MEMS and navigation graded devices, a mathematical comparison of multi-unit to single-unit sensor errors will be developed, and preliminary application to an Orion lunar skip atmospheric entry trajectory will be explored.

  19. Shifting the Inertial Navigation Paradigm with MEMS Technology

    Science.gov (United States)

    Crain, Timothy; Brady, Tye; Bishop, Robert H.

    2010-01-01

    Why don t you use MEMS? is one of the most common questions posed to navigation systems engineers designing inertial navigation solutions in the modern era. The question stems from a general understanding that great strides have been made in terrestrial MEMS accelerometers and attitude rate sensors in terms of accuracy, mass, and power. Yet, when compared on a unit-to-unit basis, MEMS devices do not provide comparable performance (accuracy) to navigation grade sensors. This paper will propose a paradigm shift where the comparison in performance is between multiple MEMS devices and a single navigation grade sensor. The concept is that systematically, a sufficient number of MEMS sensors may mathematically provide comparable performance to a single navigation grade device and be competitive in terms power and mass allocations when viewed on a systems level. The implication is that both inertial navigation system design and fault detection, identification, and recovery could benefit from a system of MEMS devices in the same way that swarm sensing has benefited Earth observation and astronomy. A survey of the state of the art in inertial sensor accuracy scaled by mass and power will be provided to show the specific error in MEMS and navigation graded devices, a mathematical comparison of multi-unit to single-unit sensor errors will be developed, and preliminary applications to Constellation vehicles will be explored.

  20. Progress of MEMS Scanning Micromirrors for Optical Bio-Imaging

    Directory of Open Access Journals (Sweden)

    Lih Y. Lin

    2015-11-01

    Full Text Available Microelectromechanical systems (MEMS have an unmatched ability to incorporate numerous functionalities into ultra-compact devices, and due to their versatility and miniaturization, MEMS have become an important cornerstone in biomedical and endoscopic imaging research. To incorporate MEMS into such applications, it is critical to understand underlying architectures involving choices in actuation mechanism, including the more common electrothermal, electrostatic, electromagnetic, and piezoelectric approaches, reviewed in this paper. Each has benefits and tradeoffs and is better suited for particular applications or imaging schemes due to achievable scan ranges, power requirements, speed, and size. Many of these characteristics are fabrication-process dependent, and this paper discusses various fabrication flows developed to integrate additional optical functionality beyond simple lateral scanning, enabling dynamic control of the focus or mirror surface. Out of this provided MEMS flexibility arises some challenges when obtaining high resolution images: due to scanning non-linearities, calibration of MEMS scanners may become critical, and inherent image artifacts or distortions during scanning can degrade image quality. Several reviewed methods and algorithms have been proposed to address these complications from MEMS scanning. Given their impact and promise, great effort and progress have been made toward integrating MEMS and biomedical imaging.

  1. The Development of the Differential MEMS Vector Hydrophone

    Directory of Open Access Journals (Sweden)

    Guojun Zhang

    2017-06-01

    Full Text Available To solve the problem that MEMS vector hydrophones are greatly interfered with by the vibration of the platform and flow noise in applications, this paper describes a differential MEMS vector hydrophone that could simultaneously receive acoustic signals and reject acceleration signals. Theoretical and simulation analyses have been carried out. Lastly, a prototype of the differential MEMS vector hydrophone has been created and tested using a standing wave tube and a vibration platform. The results of the test show that this hydrophone has a high sensitivity, Mv = −185 dB (@ 500 Hz, 0 dB reference 1 V/μPa, which is almost the same as the previous MEMS vector hydrophones, and has a low acceleration sensitivity, Mv = −58 dB (0 dB reference 1 V/g, which has decreased by 17 dB compared with the previous MEMS vector hydrophone. The differential MEMS vector hydrophone basically meets the requirements of acoustic vector detection when it is rigidly fixed to a working platform, which lays the foundation for engineering applications of MEMS vector hydrophones.

  2. A method for manufacturing a hollow mems structure

    DEFF Research Database (Denmark)

    2017-01-01

    The present invention relates to a method for manufacturing an at least partly hollow MEMS structure. In a first step one or more through-going openings is/are provided in core material. The one or more through-going openings is/are then covered by an etch-stop layer. After this step, a bottom...... further comprises the step of creating bottom and top conductors in the respective bottom and top layers. Finally, excess core material is removed in order to create the at least partly hollow MEMS structure which may include a MEMS inductor....

  3. Mathematical analysis of partial differential equations modeling electrostatic MEMS

    CERN Document Server

    Esposito, Pierpaolo; Guo, Yujin

    2010-01-01

    Micro- and nanoelectromechanical systems (MEMS and NEMS), which combine electronics with miniature-size mechanical devices, are essential components of modern technology. It is the mathematical model describing "electrostatically actuated" MEMS that is addressed in this monograph. Even the simplified models that the authors deal with still lead to very interesting second- and fourth-order nonlinear elliptic equations (in the stationary case) and to nonlinear parabolic equations (in the dynamic case). While nonlinear eigenvalue problems-where the stationary MEMS models fit-are a well-developed

  4. Differential RF MEMS interwoven capacitor immune to residual stress warping

    KAUST Repository

    Elshurafa, Amro M.

    2012-07-27

    A RF MEMS capacitor with an interwoven structure is designed, fabricated in the PolyMUMPS process and tested in an effort to address fabrication challenges usually faced in MEMS processes. The interwoven structure was found to offer several advantages over the typical MEMS parallel-plate design including eliminating the warping caused by residual stress, eliminating the need for etching holes, suppressing stiction, reducing parasitics and providing differential capability. The quality factor of the proposed capacitor was higher than five throughout a 2–10 GHz range and the resonant frequency was in excess of 20 GHz.

  5. High Volume Manufacturing and Field Stability of MEMS Products

    Science.gov (United States)

    Martin, Jack

    Low volume MEMS/NEMS production is practical when an attractive concept is implemented with business, manufacturing, packaging, and test support. Moving beyond this to high volume production adds requirements on design, process control, quality, product stability, market size, market maturity, capital investment, and business systems. In a broad sense, this chapter uses a case study approach: It describes and compares the silicon-based MEMS accelerometers, pressure sensors, image projection systems, and gyroscopes that are in high volume production. Although they serve several markets, these businesses have common characteristics. For example, the manufacturing lines use automated semiconductor equipment and standard material sets to make consistent products in large quantities. Standard, well controlled processes are sometimes modified for a MEMS product. However, novel processes that cannot run with standard equipment and material sets are avoided when possible. This reliance on semiconductor tools, as well as the organizational practices required to manufacture clean, particle-free products partially explains why the MEMS market leaders are integrated circuit manufacturers. There are other factors. MEMS and NEMS are enabling technologies, so it can take several years for high volume applications to develop. Indeed, market size is usually a strong function of price. This becomes a vicious circle, because low price requires low cost - a result that is normally achieved only after a product is in high volume production. During the early years, IC companies reduced cost and financial risk by using existing facilities for low volume MEMS production. As a result, product architectures are partially determined by capabilities developed for previous products. This chapter includes a discussion of MEMS product architecture with particular attention to the impact of electronic integration, packaging, and surfaces. Packaging and testing are critical, because they are

  6. The Sandia MEMS passive shock sensor : FY07 maturation activities.

    Energy Technology Data Exchange (ETDEWEB)

    Houston, Jack E.; Blecke, Jill; Mitchell, John Anthony; Wittwer, Jonathan W.; Crowson, Douglas A.; Clemens, Rebecca C.; Walraven, Jeremy Allen; Epp, David S.; Baker, Michael Sean

    2008-08-01

    This report describes activities conducted in FY07 to mature the MEMS passive shock sensor. The first chapter of the report provides motivation and background on activities that are described in detail in later chapters. The second chapter discusses concepts that are important for integrating the MEMS passive shock sensor into a system. Following these two introductory chapters, the report details modeling and design efforts, packaging, failure analysis and testing and validation. At the end of FY07, the MEMS passive shock sensor was at TRL 4.

  7. Millorar la memòria amb adrenalina

    OpenAIRE

    Portell Cortés, Isabel

    2010-01-01

    Aquesta recerca ha estudiat la influència positiva de l'adrenalina sobre la memòria de reconeixement, en concret per a la identitat i la localització d'un objecte determinat. Aquesta hormona afecta la manera en què el cervell guarda els records. Usant models animals de laboratori, s'ha pogut observar que l'administració d'adrenalina, després de l'entrenament de memòria, allarga la durada del record, en tasques de memòria de reconeixement, fins a deu vegades més que en els animals control....

  8. 3D heterostructures and systems for novel MEMS/NEMS

    Directory of Open Access Journals (Sweden)

    Victor Yakovlevich Prinz, Vladimir Alexandrovich Seleznev, Alexander Victorovich Prinz and Alexander Vladimirovich Kopylov

    2009-01-01

    Full Text Available In this review, we consider the application of solid micro- and nanostructures of various shapes as building blocks for micro-electro-mechanical or nano-electro-mechanical systems (MEMS/NEMS. We provide examples of practical applications of structures created by MEMS/NEMS fabrication. Novel devices are briefly described, such as a high-power electrostatic nanoactuator, a fast-response tubular anemometer for measuring gas and liquid flows, a nanoprinter, a nanosyringe and optical MEMS/NEMS. The prospects are described for achieving NEMS with tunable quantum properties.

  9. Further Evaluation of DNT Hazard Screening using Neural Networks from Rat Cortical Neurons on Multi-well Microelectrode Arrays

    Science.gov (United States)

    Thousands of chemicals have not been characterized for their DNT potential. Due to the need for DNT hazard identification, efforts to develop screening assays for DNT potential is a high priority. Multi-well microelectrode arrays (MEA) measure the spontaneous activity of electr...

  10. On-Line Monitoring the Growth of E. coli or HeLa Cells Using an Annular Microelectrode Piezoelectric Biosensor.

    Science.gov (United States)

    Tong, Feifei; Lian, Yan; Han, Junliang

    2016-12-18

    Biological information is obtained from the interaction between the series detection electrode and the organism or the physical field of biological cultures in the non-mass responsive piezoelectric biosensor. Therefore, electric parameter of the electrode will affect the biosensor signal. The electric field distribution of the microelectrode used in this study was simulated using the COMSOL Multiphysics analytical tool. This process showed that the electric field spatial distribution is affected by the width of the electrode finger or the space between the electrodes. In addition, the characteristic response of the piezoelectric sensor constructed serially with an annular microelectrode was tested and applied for the continuous detection of Escherichia coli culture or HeLa cell culture. Results indicated that the piezoelectric biosensor with an annular microelectrode meets the requirements for the real-time detection of E. coli or HeLa cells in culture. Moreover, this kind of piezoelectric biosensor is more sensitive than the sensor with an interdigital microelectrode. Thus, the piezoelectric biosensor acts as an effective analysis tool for acquiring online cell or microbial culture information.

  11. Superhydrophobic Surface Coatings for Microfluidics and MEMs.

    Energy Technology Data Exchange (ETDEWEB)

    Branson, Eric D.; Singh, Seema [Sandia National Laboratories, Livermore, CA; Houston, Jack E.; van Swol, Frank B.; Brinker, C. Jeffrey

    2006-11-01

    Low solid interfacial energy and fractally rough surface topography confer to Lotus plants superhydrophobic (SH) properties like high contact angles, rolling and bouncing of liquid droplets, and self-cleaning of particle contaminants. This project exploits the porous fractal structure of a novel, synthetic SH surface for aerosol collection, its self-cleaning properties for particle concentration, and its slippery nature 3 to enhance the performance of fluidic and MEMS devices. We propose to understand fundamentally the conditions needed to cause liquid droplets to roll rather than flow/slide on a surface and how this %22rolling transition%22 influences the boundary condition describing fluid flow in a pipe or micro-channel. Rolling of droplets is important for aerosol collection strategies because it allows trapped particles to be concentrated and transported in liquid droplets with no need for a pre-defined/micromachined fluidic architecture. The fluid/solid boundary condition is important because it governs flow resistance and rheology and establishes the fluid velocity profile. Although many research groups are exploring SH surfaces, our team is the first to unambiguously determine their effects on fluid flow and rheology. SH surfaces could impact all future SNL designs of collectors, fluidic devices, MEMS, and NEMS. Interfaced with inertial focusing aerosol collectors, SH surfaces would allow size-specific particle populations to be collected, concentrated, and transported to a fluidic interface without loss. In microfluidic systems, we expect to reduce the energy/power required to pump fluids and actuate MEMS. Plug-like (rather than parabolic) velocity profiles can greatly improve resolution of chip-based separations and enable unprecedented control of concentration profiles and residence times in fluidic-based micro-reactors. Patterned SH/hydrophilic channels could induce mixing in microchannels and enable development of microflow control elements

  12. Optimisation of a microfluidic analysis chamber for the placement of microelectrodes.

    Science.gov (United States)

    Rogers, Michelle; Leong, Chi; Niu, Xize; de Mello, Andrew; Parker, Kim H; Boutelle, Martyn G

    2011-03-28

    The behaviour of droplets entering a microfluidic chamber designed to house microelectrode detectors for real time analysis of clinical microdialysate is described. We have designed an analysis chamber to collect the droplets produced by multiphase flows of oil and artificial cerebral spinal fluid. The coalescence chamber creates a constant aqueous environment ideal for the placement of microelectrodes avoiding the contamination of the microelectrode surface by oil. A stream of alternating light and dark coloured droplets were filmed as they passed through the chamber using a high speed camera. Image analysis of these videos shows the colour change evolution at each point along the chamber length. The flow in the chamber was simulated using the general solution for Poiseuille flow in a rectangular chamber. It is shown that on the centre line the velocity profile is very close to parabolic, and an expression is presented for the ratio between this centre line velocity and the mean flow velocity as a function of channel aspect ratio. If this aspect ratio of width/height is 2, the ratio of flow velocities closely matches that of Poiseuille flow in a circular tube, with implications for connections between microfluidic channels and connection tubing. The droplets are well mixed as the surface tension at the interface with the oil dominates the viscous forces. However once the droplet coalesces with the solution held in the chamber, the no-slip condition at the walls allows Poiseuille flow to take over. The meniscus at the back of the droplet continues to mix the droplet and acts as a piston until the meniscus stops moving. We have found that the no-slip conditions at the walls of the chamber, create a banding effect which records the history of previous drops. The optimal position for sensors is to be placed at the plane of droplet coalescence ideally at the centre of the channel, where there is an abrupt concentration change leading to a response time ≪16 ms, the

  13. Quantitative Analysis of Rat Dorsal Root Ganglion Neurons Cultured on Microelectrode Arrays Based on Fluorescence Microscopy Image Processing.

    Science.gov (United States)

    Mari, João Fernando; Saito, José Hiroki; Neves, Amanda Ferreira; Lotufo, Celina Monteiro da Cruz; Destro-Filho, João-Batista; Nicoletti, Maria do Carmo

    2015-12-01

    Microelectrode Arrays (MEA) are devices for long term electrophysiological recording of extracellular spontaneous or evocated activities on in vitro neuron culture. This work proposes and develops a framework for quantitative and morphological analysis of neuron cultures on MEAs, by processing their corresponding images, acquired by fluorescence microscopy. The neurons are segmented from the fluorescence channel images using a combination of segmentation by thresholding, watershed transform, and object classification. The positioning of microelectrodes is obtained from the transmitted light channel images using the circular Hough transform. The proposed method was applied to images of dissociated culture of rat dorsal root ganglion (DRG) neuronal cells. The morphological and topological quantitative analysis carried out produced information regarding the state of culture, such as population count, neuron-to-neuron and neuron-to-microelectrode distances, soma morphologies, neuron sizes, neuron and microelectrode spatial distributions. Most of the analysis of microscopy images taken from neuronal cultures on MEA only consider simple qualitative analysis. Also, the proposed framework aims to standardize the image processing and to compute quantitative useful measures for integrated image-signal studies and further computational simulations. As results show, the implemented microelectrode identification method is robust and so are the implemented neuron segmentation and classification one (with a correct segmentation rate up to 84%). The quantitative information retrieved by the method is highly relevant to assist the integrated signal-image study of recorded electrophysiological signals as well as the physical aspects of the neuron culture on MEA. Although the experiments deal with DRG cell images, cortical and hippocampal cell images could also be processed with small adjustments in the image processing parameter estimation.

  14. Advantages of PZT thick film for MEMS sensors

    DEFF Research Database (Denmark)

    Hindrichsen, Christian Carstensen; Lou-Moller, R.; Hansen, K.

    2010-01-01

    For all MEMS devices a high coupling between the mechanical and electrical domain is desired. Figures of merit describing the coupling are important for comparing different piezoelectric materials. The existing figures of merit are discussed and a new figure of merit is introduced for a fair...... comparison of piezoelectric thin and thick films based MEMS devices, as cantilevers, beams, bridges and membranes. Simple analytical modeling is used to define the new figure of merit. The relevant figure of merits is compared for the piezoelectric material of interest for MEMS applications: ZnO, AIN, PZT....... Improved figure of merit is reached in the piezoelectric PZT thick film, TF2100CIP, by using cold isostatic pressure in the PZT preparation process. The porosity of TF2100 is decreased 38%, hence, allowing an increase of charge sensitivity for MEMS sensors of 59%....

  15. Planetary-Whigs: Optical MEMS-Based Seismometer, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — During this Phase I, Michigan Aerospace Corporation will adapt the design of an optical MEMS seismometer for lunar and other planetary science instrumentation. The...

  16. Ultra-Low-Power MEMS Selective Gas Sensors, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — KWJ offers this proposal for a very low power but very practical "nano-watt" MEMS sensor platform for NASA requirements. The proposed nano-sensor platform is ultra...

  17. High Speed Magnetostrictive MEMS Actuated Mirror Deflectors, Phase II

    Data.gov (United States)

    National Aeronautics and Space Administration — The main goal of this proposal is to develop high speed magnetostrictive and MEMS actuators for rapidly deflecting or deforming mirrors. High speed, light-weight,...

  18. Nanotwinned metal MEMS films with unprecedented strength and stability.

    Science.gov (United States)

    Sim, Gi-Dong; Krogstad, Jessica A; Reddy, K Madhav; Xie, Kelvin Y; Valentino, Gianna M; Weihs, Timothy P; Hemker, Kevin J

    2017-06-01

    Silicon-based microelectromechanical systems (MEMS) sensors have become ubiquitous in consumer-based products, but realization of an interconnected network of MEMS devices that allows components to be remotely monitored and controlled, a concept often described as the "Internet of Things," will require a suite of MEMS materials and properties that are not currently available. We report on the synthesis of metallic nickel-molybdenum-tungsten films with direct current sputter deposition, which results in fully dense crystallographically textured films that are filled with nanotwins. These films exhibit linear elastic mechanical behavior and tensile strengths exceeding 3 GPa, which is unprecedented for materials that are compatible with wafer-level device fabrication processes. The ultrahigh strength is attributed to a combination of solid solution strengthening and the presence of dense nanotwins. These films also have excellent thermal and mechanical stability, high density, and electrical properties that are attractive for next-generation metal MEMS applications.

  19. An analytical formulation for phase noise in MEMS oscillators.

    Science.gov (United States)

    Agrawal, Deepak; Seshia, Ashwin

    2014-12-01

    In recent years, there has been much interest in the design of low-noise MEMS oscillators. This paper presents a new analytical formulation for noise in a MEMS oscillator encompassing essential resonator and amplifier nonlinearities. The analytical expression for oscillator noise is derived by solving a second-order nonlinear stochastic differential equation. This approach is applied to noise modeling of an electrostatically addressed MEMS resonator-based square-wave oscillator in which the resonator and oscillator circuit nonlinearities are integrated into a single modeling framework. By considering the resulting amplitude and phase relations, we derive additional noise terms resulting from resonator nonlinearities. The phase diffusion of an oscillator is studied and the phase diffusion coefficient is proposed as a metric for noise optimization. The proposed nonlinear phase noise model provides analytical insight into the underlying physics and a pathway toward the design optimization for low-noise MEMS oscillators.

  20. Tactical Grade MEMS IMUs for Spin-Stabilized Rockets Project

    Data.gov (United States)

    National Aeronautics and Space Administration — We propose a tactical grade MEMS IMU for spin-stabilized rockets for metric tracking and autonomous systems. The enabling instrument is a gyroscope designed for very...

  1. MEMS Sensor Arrays for Cryogenic Propellant Applications, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — KWJ offers this proposal for a low-power, practical and versatile MEMS sensor platform for NASA applications. The proposed nano-sensor platform is ultra-low power...

  2. Reaction Wheel with Embedded MEMS IMU, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — The innovation is to embed a MEMS IMU Sensor Chip into a reaction wheel to measure its spin rate as well as wheel attitude rate. We propose to use a reaction wheel...

  3. Picometer-Resolution MEMS Segmented DM, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — Microelectromechanical systems (MEMS) technology has the potential to create deformable mirrors (DM) with 10^4 actuators that have size, weight, and power...

  4. MEMS/Electronic Device Design and Characterization Facility

    Data.gov (United States)

    Federal Laboratory Consortium — This facility allows DoD to design and characterize state-of-the-art microelectromechanical systems (MEMS) and electronic devices. Device designers develop their own...

  5. 1015 PTT Segment MEMS DM Development, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — Microelectromechanical systems (MEMS) technology has the potential to create deformable mirrors (DM) with more than 10^4 actuators with size, weight, and power...

  6. Picometer-Resolution MEMS Segmented DM, Phase II

    Data.gov (United States)

    National Aeronautics and Space Administration — Microelectromechanical systems (MEMS) technology has the potential to create deformable mirrors (DM) with 10^4 actuators that have size, weight, and power...

  7. Extreme-Precision MEMS Segmented Deformable Mirror, Phase II

    Data.gov (United States)

    National Aeronautics and Space Administration — In Phase I research, Iris AO developed enhanced electromechanical models and calibration techniques for MEMS-based segmented deformable mirrors (DMs) applicable to a...

  8. MEMS-based transmission lines for microwave applications

    Science.gov (United States)

    Wu, Qun; Fu, Jiahui; Gu, Xuemai; Shi, Huajuan; Lee, Jongchul

    2003-04-01

    This paper mainly presents a briefly review for recent progress in MEMS-based transmission lines for use in microwave and millimeterwave range. MEMS-based transmission lines including different transmission line structure such as membrane-supported microstrip line microstrip line, coplanar microshield transmission line, LIGA micromachined planar transmission line, micromachined waveguides and coplanar waveguide are discussed. MEMS-based transmission lines are characterized by low propagation loss, wide operation frequency band, low dispersion and high quality factor, in addition, the fabrication is compatible with traditional processing of integrated circuits (IC"s). The emergence of MEMS-based transmission lines provided a solution for miniaturizing microwave system and monolithic microwave integrated circuits.

  9. High Speed Magnetostrictive MEMS Actuated Mirror Deflectors, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — We propose to develop high speed magnetostrictive and MEMS actuators for rapidly deflecting or deforming mirrors. High speed, light-weight, low voltage beam...

  10. Laboratory for Development, Calibration and Utilization of MEMS Devices

    National Research Council Canada - National Science Library

    Reshotko, Eli

    1997-01-01

    ... (notification letter dated 28 May 1997) to 31 May 1997. This DURIP equipment grant has provided us with the means to proceed in our development of MEMS devices for fluid dynamic and aerodynamic applications...

  11. Co-deposition of carbon dots and reduced graphene oxide nanosheets on carbon-fiber microelectrode surface for selective detection of dopamine

    Science.gov (United States)

    Fang, Jian; Xie, Zhigang; Wallace, Gordon; Wang, Xungai

    2017-08-01

    In this work, carbon dots (CD) decorated graphene oxide (GO) nanosheets were electrochemically reduced and deposited onto carbon fiber (CF) to fabricate microelectrodes for highly sensitive and selective dopamine (DA) detection, in the presence of ascorbic acid (AA) and uric acid (UA). The results have shown that surface modification considerably increases the electrocatalytic activity of the carbon fiber microelectrode. Due to possible aggregation of the rGO sheets during deposition, modifying the microelectrode surface with rGO sheets alone cannot achieve the selectivity required for simultaneous detection of DA, AA and UA. Through attaching CD onto GO sheets, the rGO + CD/CF microelectrode performance was significantly improved. The existence of CD on GO sheets can effectively avoid inter-layer stacking of the rGO sheets and provide increased surface area for neurotransmitter-electrode interaction enhancement. The CD can also increase the charge storage capacity of GO sheets. This is the first report on applying both CD and rGO for surface modification of carbon fiber microelectrode. The rGO + CD/CF microelectrode has achieved a linear DA detection concentration range of 0.1-100 μM, with a detection limit of 0.02 μM. The sensitivity of the microelectrode towards DA was as high as 6.5 nA/μM, which is significantly higher than previously reported carbon fiber microelectrodes. The highly sensitive all-carbon based microelectrodes should find use in a number of biomedical applications, such as neurotransmitter detection, neural signal recording and cell physiology studies.

  12. Highly Tunable Narrow Bandpass MEMS Filter

    KAUST Repository

    Hafiz, Md Abdullah Al

    2017-07-07

    We demonstrate a proof-of-concept highly tunable narrow bandpass filter based on electrothermally and electrostatically actuated microelectromechanical-system (MEMS) resonators. The device consists of two mechanically uncoupled clamped-clamped arch resonators, designed such that their resonance frequencies are independently tuned to obtain the desired narrow passband. Through the electrothermal and electrostatic actuation, the stiffness of the structures is highly tunable. We experimentally demonstrate significant percentage tuning (~125%) of the filter center frequency by varying the applied electrothermal voltages to the resonating structures, while maintaining a narrow passband of 550 ± 50 Hz, a stopband rejection of >17 dB, and a passband ripple ≤ 2.5 dB. An analytical model based on the Euler-Bernoulli beam theory is used to confirm the behavior of the filter, and the origin of the high tunability using electrothermal actuation is discussed.

  13. Strong Motion Seismograph Based On MEMS Accelerometer

    Science.gov (United States)

    Teng, Y.; Hu, X.

    2013-12-01

    The MEMS strong motion seismograph we developed used the modularization method to design its software and hardware.It can fit various needs in different application situation.The hardware of the instrument is composed of a MEMS accelerometer,a control processor system,a data-storage system,a wired real-time data transmission system by IP network,a wireless data transmission module by 3G broadband,a GPS calibration module and power supply system with a large-volumn lithium battery in it. Among it,the seismograph's sensor adopted a three-axis with 14-bit high resolution and digital output MEMS accelerometer.Its noise level just reach about 99μg/√Hz and ×2g to ×8g dynamically selectable full-scale.Its output data rates from 1.56Hz to 800Hz. Its maximum current consumption is merely 165μA,and the device is so small that it is available in a 3mm×3mm×1mm QFN package. Furthermore,there is access to both low pass filtered data as well as high pass filtered data,which minimizes the data analysis required for earthquake signal detection. So,the data post-processing can be simplified. Controlling process system adopts a 32-bit low power consumption embedded ARM9 processor-S3C2440 and is based on the Linux operation system.The processor's operating clock at 400MHz.The controlling system's main memory is a 64MB SDRAM with a 256MB flash-memory.Besides,an external high-capacity SD card data memory can be easily added.So the system can meet the requirements for data acquisition,data processing,data transmission,data storage,and so on. Both wired and wireless network can satisfy remote real-time monitoring, data transmission,system maintenance,status monitoring or updating software.Linux was embedded and multi-layer designed conception was used.The code, including sensor hardware driver,the data acquisition,earthquake setting out and so on,was written on medium layer.The hardware driver consist of IIC-Bus interface driver, IO driver and asynchronous notification driver. The

  14. Torsion based universal MEMS logic device

    KAUST Repository

    Ilyas, Saad

    2015-10-28

    In this work we demonstrate torsion based complementary MEMS logic device, which is capable, of performing INVERTER, AND, NAND, NOR, and OR gates using one physical structure within an operating range of 0-10 volts. It can also perform XOR and XNOR with one access inverter using the same structure with different electrical interconnects. The paper presents modeling, fabrication and experimental calculations of various performance features of the device including lifetime, power consumption and resonance frequency. The fabricated device is 535 μm by 150 μm with a gap of 1.92 μm and a resonant frequency of 6.51 kHz. The device is capable of performing the switching operation with a frequency of 1 kHz.

  15. MEMS inertial sensors with integral rotation means.

    Energy Technology Data Exchange (ETDEWEB)

    Kohler, Stewart M.

    2003-09-01

    The state-of-the-art of inertial micro-sensors (gyroscopes and accelerometers) has advanced to the point where they are displacing the more traditional sensors in many size, power, and/or cost-sensitive applications. A factor limiting the range of application of inertial micro-sensors has been their relatively poor bias stability. The incorporation of an integral sensitive axis rotation capability would enable bias mitigation through proven techniques such as indexing, and foster the use of inertial micro-sensors in more accuracy-sensitive applications. Fabricating the integral rotation mechanism in MEMS technology would minimize the penalties associated with incorporation of this capability, and preserve the inherent advantages of inertial micro-sensors.

  16. MEMS switches having non-metallic crossbeams

    Science.gov (United States)

    Scardelletti, Maximillian C (Inventor)

    2009-01-01

    A RF MEMS switch comprising a crossbeam of SiC, supported by at least one leg above a substrate and above a plurality of transmission lines forming a CPW. Bias is provided by at least one layer of metal disposed on a top surface of the SiC crossbeam, such as a layer of chromium followed by a layer of gold, and extending beyond the switch to a biasing pad on the substrate. The switch utilizes stress and conductivity-controlled non-metallic thin cantilevers or bridges, thereby improving the RF characteristics and operational reliability of the switch. The switch can be fabricated with conventional silicon integrated circuit (IC) processing techniques. The design of the switch is very versatile and can be implemented in many transmission line mediums.

  17. Wideband MEMS Resonator Using Multifrequency Excitation

    KAUST Repository

    Jaber, Nizar

    2016-03-09

    We demonstrate the excitation of combination resonances of additive and subtractive types and their exploitations to realize a large bandwidth micro-machined resonator of large amplitude even at higher harmonic modes of vibrations. The investigation is conducted on a Microelectromechanical systems (MEMS) clamped-clamped microbeam fabricated using polyimide as a structural layer coated with nickel from top and chromium and gold layers from bottom. The microbeam is excited by a two-source harmonic excitation, where the first frequency source is swept around the targeted resonance (first or third mode of vibration) while the second source frequency is kept fixed. We report for the first time a large bandwidth and large amplitude response near the higher order modes of vibration. Also, we show that by properly tuning the frequency and amplitude of the excitation force, the frequency bandwidth of the resonator is controlled.

  18. Feedback Control of MEMS to Atoms

    CERN Document Server

    Shapiro, Benjamin

    2012-01-01

    Feedback Control of MEMS to Atoms illustrates the use of control and control systems as an essential part of functioning integrated miniaturized systems. The book is organized according to the dimensional scale of the problem, starting with microscale systems and ending with atomic-scale systems. Similar to macroscale machines and processes, control systems can play a major role in improving the performance of micro- and nanoscale systems and in enabling new capabilities that would otherwise not be possible. The majority of problems at these scales present many new challenges that go beyond the current state-of-the-art in control theory and engineering. This is a result of the multidisciplinary nature of micro/nanotechnology, which requires the merging of control engineering with physics, biology and chemistry. This book: Shows how the utilization of feedback control in nanotechnology instrumentation can yield results far better than passive systems can Discusses the application of control systems to problems...

  19. Quantitative Boundary Support Characterization for Cantilever MEMS

    Directory of Open Access Journals (Sweden)

    Ion Stiharu

    2007-10-01

    Full Text Available Microfabrication limitations are of concern especially for suspended Micro-Electro-Mechanical-Systems (MEMS microstructures such as cantilevers. The static anddynamic qualities of such microscale devices are directly related to the invariant and variantproperties of the microsystem. Among the invariant properties, microfabrication limitationscan be quantified only after the fabrication of the device through testing. However, MEMSare batch fabricated in large numbers where individual testing is neither possible nor costeffective. Hence, a suitable test algorithm needs to be developed where the test resultsobtained for a few devices can be applied to the whole fabrication batch, and also to thefoundry process in general. In this regard, this paper proposes a method to test MEMScantilevers under variant electro-thermal influences in order to quantify the effectiveboundary support condition obtained for a foundry process. A non-contact optical sensingapproach is employed for the dynamic testing. The Rayleigh-Ritz energy method usingboundary characteristic orthogonal polynomials is employed for the modeling andtheoretical analysis.

  20. Ultra-Low-Power MEMS Selective Gas Sensors

    Science.gov (United States)

    Stetter, Joseph

    2012-01-01

    This innovation is a system for gas sensing that includes an ultra-low-power MEMS (microelectromechanical system) gas sensor, combined with unique electronic circuitry and a proprietary algorithm for operating the sensor. The electronics were created from scratch, and represent a novel design capable of low-power operation of the proprietary MEMS gas sensor platform. The algorithm is used to identify a specific target gas in a gas mixture, making the sensor selective to that target gas.

  1. Design and Fabrication of a Flow Delivery Microdevice with Asymmetric Microelectrodes Pairs

    Science.gov (United States)

    Kiat Tay, Hong; Lee, Daniel; Xu, Guolin; Yang, Chun

    2006-04-01

    A microdevice using AC electrokinetic flow and negative dielectrophoresis for cell delivery is proposed, designed and fabricated. The device is made from an unequal width interdigitated microelectrode located at the bottom of microchannels, with AC voltage applied to the small and large electrode. Negative dielectrophoresis is used to prevent the cells from sinking down to the bottom of delivery channel. The flow rate is affected by the electrode pair dimensions, applied frequency and voltage and are analysed. The device electrode width is from 4µm to 20µm and it is microfabricated on glass wafer using gold thin film. 3 microchannels connected to 2 reservoirs are covered by the electrode pair for the delivery channel. SU-8 micromold is used for the channels' PDMS fabrication.

  2. Microelectrode generator-collector systems for electrolytic titration: theoretical and practical considerations.

    Science.gov (United States)

    Bell, Christopher G; Seelanan, Parinya; O'Hare, Danny

    2017-10-23

    Electochemical generator-collector systems, where one electrode is used to generate a reagent, have a potentially large field of application in sensing and measurement. We present a new theoretical description for coplanar microelectrode disc-disc systems where the collector is passive (such as a potentiometric sensor) and the generator is operating at constant flux. This solution is then used to develop a leading order solution for such a system where the reagent reacts reversibly in solution, such as in acid-base titration, where a hydrogen ion flux is generated by electrolysis of water. The principal novel result of the theory is that such devices are constrained by a maximum reagent flux. The hydrogen ion concentration at the collector will only reflect the buffer capacity of the bulk solution if this constraint is met. Both mathematical solutions are evaluated with several microfabricated devices and reasonable agreement with theory is demonstrated.

  3. Note: Microelectrode-shielding tip for scanning probe electron energy spectroscopy

    Science.gov (United States)

    Huang, Wei; Li, Zhean; Xu, Chunkai; Liu, Jian; Xu, Chunye; Chen, Xiangjun

    2018-04-01

    We report a novel microelectrode-shielding tip (ME tip) for scanning probe electron energy spectroscopy (SPEES). The shielding effect of this tip is studied through comparing the detection efficiency with the normal tip by both experiment and simulation. The results show that the backscattering count rate detected by the SPEES instrument using the normal tip begins to decrease as the tip approaches to the sample surface within 21 μm, while that using the ME tip only starts to drop off within 1 μm. This indicates that the electron energy spectra can be measured with the ME tip at a much closer tip-sample distance. Furthermore, it is also demonstrated that the ME tip can be used to obtain topography of the sample surface in situ simultaneously.

  4. Hydrogen Peroxide Impedimetric Detection on Poly-Ortho-Phenylenediamine Modified Platinum Disk Microelectrode

    International Nuclear Information System (INIS)

    Zainiharyati Mohd Zain; Norazreen Zakaria

    2014-01-01

    This work describes the development of hydrogen peroxide detection based on Poly-ortho-phenylenediamine modified Platinum disk microelectrode (50 μm in diameter). The electrochemical performances of H 2 O 2 detection were studied using Chronoamperometry, Cyclic Voltammetry (CV) and Electrochemical Impedance Spectroscopy (EIS) techniques in Phosphate Buffer Solution (PBS) pH 7.4. Effect of potential, electrode size, and various concentrations of H 2 O 2 , among others, were investigated by tracking the impedance changes at a specific perturbation frequency. To obtain the Charge transfer resistance (R ct ) values, a modified Randles Equivalent Circuit was modelled and fitted to Nyquist Plot. Then, this sensor was further applied in the detection of H 2 O 2 in antiseptic mouthwash with percent recovery of 97 % ± 0.14 (x10 3 kΩ). (author)

  5. Purification of carbon nanotubes through an electric field near the arranged microelectrodes

    International Nuclear Information System (INIS)

    Shim, Hyung Cheoul; Lee, Hyung Woo; Yeom, Sujin; Kwak, Yoon Keun; Lee, Seung S; Kim, Soo Hyun

    2007-01-01

    In this work, we attempt to purify multi-walled carbon nanotubes (MWNTs) using electrophoresis induced by the application of an AC electric field to a set of microelectrodes in a microliquid channel. This purifying method is different from conventional methods based on chemical processes. It was observed that most of the MWNTs could pass along the microliquid channel without attaching to the electrode under specific conditions of 1 kHz, at 0.2 V rms μm -1 . On the other hand, the majority of the carbon impurities attached to the electrodes under identical conditions. Field emission scanning electron microscopy (FESEM) images and Raman spectra confirm that this condition is beneficial for removing carbon impurities. The proposed approach has potential applicability in the development of microdevices that can simultaneously perform the purification and fabrication of MWNTs

  6. Doped Overoxidized Polypyrrole Microelectrodes as Sensors for the Detection of Dopamine Released from Cell Populations

    DEFF Research Database (Denmark)

    Sasso, Luigi; Heiskanen, Arto; Diazzi, Francesco

    2013-01-01

    A surface modification of interdigitated gold microelectrodes (IDEs) with a doped polypyrrole (PPy) film for detection of dopamine released from populations of differentiated PC12 cells is presented. A thin PPy layer was potentiostatically electropolymerized from an 10 aqueous pyrrole solution onto...... electrode surfaces. The conducting polymer film was doped during electropolymerization by introducing counter ions in the monomer solution. Several counter ions were tested and the resulting electrode modifications were characterized electrochemically to find the optimal dopant that increases sensitivity...... in dopamine detection. Overoxidation of the PPy films was shown to contribute to a significant enhancement in sensitivity to dopamine. The changes caused by overoxidation in the electrochemical behavior and electrode morphology were investigated using cyclic voltammetry and SEM as well as AFM, respectively...

  7. Microelectrode Arrays and the Use of PEG-Functionalized Diblock Copolymer Coatings

    Directory of Open Access Journals (Sweden)

    Sakshi Uppal

    2014-09-01

    Full Text Available PEG-modified diblock copolymer surfaces have been examined for their compatibility with microelectrode array based analytical methods. The use of PEG-modified polymer surfaces on the arrays was initially problematic because the redox couples used in the experiments were adsorbed by the polymer. This led the current measured by cyclic voltammetry for the redox couple to be unstable and increase with time. However, two key findings allow the experiments to be successful. First, after multiple cyclic voltammograms the current associated with the redox couple does stabilize so that a good baseline current can be established. Second, the rate at which the current stabilizes is consistent every time a particular coated array is used. Hence, multiple analytical experiments can be conducted on an array coated with a PEG-modified diblock copolymer and the data obtained is comparable as long as the data for each experiment is collected at a consistent time point.

  8. MiRNA Quantitation with Microelectrode Sensors Enabled by Enzymeless Electrochemical Signal Amplification.

    Science.gov (United States)

    Wang, Tanyu; Wang, Gangli; Merlin, Didier; Viennois, Emilie

    2017-01-01

    Quantification of circulating microRNAs (miRNAs) is of great interest because of their potentials as disease biomarkers. Currently, quantitative reverse transcription polymerase chain reaction (qRT-PCR) and microarray are considered mainstream techniques for miRNA identification and quantitation. However, these techniques are challenged by the low levels and wide dynamic range (from aM to nM) of miRNAs in a physiological sample, as well as the difficulty in the implementation in point-of-care settings. Here, we describe a one-step label-free electrochemical sensing technique by assembling a triple-stem DNA-redox probe structure on a gold microelectrode and introducing a reductant, tris(2-carboxyethyl) phosphine hydrochloride (TCEP) in the detection buffer solution to achieve ultrasensitive miRNAs detection with a detection limit of 0.1 fM.

  9. PEDOT–CNT Composite Microelectrodes for Recording and Electrostimulation Applications: Fabrication, Morphology, and Electrical Properties

    Science.gov (United States)

    Gerwig, Ramona; Fuchsberger, Kai; Schroeppel, Birgit; Link, Gordon Steve; Heusel, Gerhard; Kraushaar, Udo; Schuhmann, Wolfgang; Stett, Alfred; Stelzle, Martin

    2012-01-01

    Composites of carbon nanotubes and poly(3,4-ethylenedioxythiophene, PEDOT) and layers of PEDOT are deposited onto microelectrodes by electropolymerization of ethylenedioxythiophene in the presence of a suspension of carbon nanotubes and polystyrene sulfonate. Analysis by FIB and SEM demonstrates that CNT–PEDOT composites exhibit a porous morphology whereas PEDOT layers are more compact. Accordingly, capacitance and charge injection capacity of the composite material exceed those of pure PEDOT layers. In vitro cell culture experiments reveal excellent biocompatibility and adhesion of both PEDOT and PEDOT–CNT electrodes. Signals recorded from heart muscle cells demonstrate the high S/N ratio achievable with these electrodes. Long-term pulsing experiments confirm stability of charge injection capacity. In conclusion, a robust fabrication procedure for composite PEDOT–CNT electrodes is demonstrated and results show that these electrodes are well suited for stimulation and recording in cardiac and neurophysiological research. PMID:22586394

  10. PEDOT-CNT composite microelectrodes for recording and electrostimulation applications: fabrication, morphology and electrical properties

    Directory of Open Access Journals (Sweden)

    Ramona eGerwig

    2012-05-01

    Full Text Available Composites of carbon nanotubes and poly(3,4-ethylenedioxythiophene (PEDOT and layers of PEDOT are deposited onto microelectrodes by electropolymerization of ethylenedioxythiophene in the presence of a suspension of carbon nanotubes and polystyrenesulfonate. Analysis by FIB and SEM demonstrate that CNT-PEDOT composites exhibit a porous morphology whereas PEDOT layers are more compact. Accordingly, capacitance and charge injection capacity of the composite material exceed those of pure PEDOT layers. In vitro cell culture experiments reveal excellent biocompatibility and mechanical stability of both PEDOT and PEDOT-CNT electrodes. Signals recorded from heart muscle cells demonstrate the high S/N ratio achievable with these electrodes. Long-term pulsing experiments confirm stability of charge injection capacity. In conclusion, a robust fabrication procedure for composite PEDOT-CNT electrodes is demonstrated and results show that these electrodes are well suited for stimulation and recording in cardiac and neurophysiological research.

  11. Detachable glass microelectrodes for recording action potentials in active moving organs.

    Science.gov (United States)

    Barbic, Mladen; Moreno, Angel; Harris, Tim D; Kay, Matthew W

    2017-06-01

    Here, we describe new detachable floating glass micropipette electrode devices that provide targeted action potential recordings in active moving organs without requiring constant mechanical constraint or pharmacological inhibition of tissue motion. The technology is based on the concept of a glass micropipette electrode that is held firmly during cell targeting and intracellular insertion, after which a 100-µg glass microelectrode, a "microdevice," is gently released to remain within the moving organ. The microdevices provide long-term recordings of action potentials, even during millimeter-scale movement of tissue in which the device is embedded. We demonstrate two different glass micropipette electrode holding and detachment designs appropriate for the heart (sharp glass microdevices for cardiac myocytes in rats, guinea pigs, and humans) and the brain (patch glass microdevices for neurons in rats). We explain how microdevices enable measurements of multiple cells within a moving organ that are typically difficult with other technologies. Using sharp microdevices, action potential duration was monitored continuously for 15 min in unconstrained perfused hearts during global ischemia-reperfusion, providing beat-to-beat measurements of changes in action potential duration. Action potentials from neurons in the hippocampus of anesthetized rats were measured with patch microdevices, which provided stable base potentials during long-term recordings. Our results demonstrate that detachable microdevices are an elegant and robust tool to record electrical activity with high temporal resolution and cellular level localization without disturbing the physiological working conditions of the organ. NEW & NOTEWORTHY Cellular action potential measurements within tissue using glass micropipette electrodes usually require tissue immobilization, potentially influencing the physiological relevance of the measurement. Here, we addressed this limitation with novel 100-µg detachable

  12. Quantifying long-term microelectrode array functionality using chronic in vivo impedance testing

    Science.gov (United States)

    Prasad, Abhishek; Sanchez, Justin C.

    2012-04-01

    Long-term acquisition of high-quality neural recordings is a cornerstone of neuroprosthetic system design. Mitigating the experimental variability of chronically implanted arrays has been a formidable task because the sensor recording sites can be influenced by biotic and abiotic responses. Several studies have implicated changes in electrical interface impedance as a preliminary marker to infer electrode viability. Microelectrode impedance plays an important role in the monitoring of low amplitude and high-resolution extracellular neural signals. In this work, we seek to quantify long-term microelectrode array functionality and derive an impedance-based predictor for electrode functionality that correlates the recording site electrical properties with the functional neuronal recordings in vivo. High temporal resolution metrics of this type would allow one to assess, predict, and improve electrode performance in the future. In a large cohort of animals, we performed daily impedance measurements and neural signal recordings over long periods (up to 21 weeks) of time in rats using tungsten microwire arrays implanted into the somatosensory cortex. This study revealed that there was a time-varying trend in the modulation of impedance that was related to electrode performance. Single units were best detected from electrodes at time points when the electrode entered into the 40-150 KΩ impedance range. This impedance trend was modeled across the full cohort of animals to predict future electrode performance. The model was tested on data from all animals and was able to provide predictions of electrode performance chronically. Insight from this study can be combined with knowledge of electrode materials and histological analysis to provide a more comprehensive predictive model of electrode failure in the future.

  13. Unsupervised neural spike sorting for high-density microelectrode arrays with convolutive independent component analysis.

    Science.gov (United States)

    Leibig, Christian; Wachtler, Thomas; Zeck, Günther

    2016-09-15

    Unsupervised identification of action potentials in multi-channel extracellular recordings, in particular from high-density microelectrode arrays with thousands of sensors, is an unresolved problem. While independent component analysis (ICA) achieves rapid unsupervised sorting, it ignores the convolutive structure of extracellular data, thus limiting the unmixing to a subset of neurons. Here we present a spike sorting algorithm based on convolutive ICA (cICA) to retrieve a larger number of accurately sorted neurons than with instantaneous ICA while accounting for signal overlaps. Spike sorting was applied to datasets with varying signal-to-noise ratios (SNR: 3-12) and 27% spike overlaps, sampled at either 11.5 or 23kHz on 4365 electrodes. We demonstrate how the instantaneity assumption in ICA-based algorithms has to be relaxed in order to improve the spike sorting performance for high-density microelectrode array recordings. Reformulating the convolutive mixture as an instantaneous mixture by modeling several delayed samples jointly is necessary to increase signal-to-noise ratio. Our results emphasize that different cICA algorithms are not equivalent. Spike sorting performance was assessed with ground-truth data generated from experimentally derived templates. The presented spike sorter was able to extract ≈90% of the true spike trains with an error rate below 2%. It was superior to two alternative (c)ICA methods (≈80% accurately sorted neurons) and comparable to a supervised sorting. Our new algorithm represents a fast solution to overcome the current bottleneck in spike sorting of large datasets generated by simultaneous recording with thousands of electrodes. Copyright © 2016 Elsevier B.V. All rights reserved.

  14. MEMS Reliability: Infrastructure, Test Structures, Experiments, and Failure Modes

    Energy Technology Data Exchange (ETDEWEB)

    TANNER,DANELLE M.; SMITH,NORMAN F.; IRWIN,LLOYD W.; EATON,WILLIAM P.; HELGESEN,KAREN SUE; CLEMENT,J. JOSEPH; MILLER,WILLIAM M.; MILLER,SAMUEL L.; DUGGER,MICHAEL T.; WALRAVEN,JEREMY A.; PETERSON,KENNETH A.

    2000-01-01

    The burgeoning new technology of Micro-Electro-Mechanical Systems (MEMS) shows great promise in the weapons arena. We can now conceive of micro-gyros, micro-surety systems, and micro-navigators that are extremely small and inexpensive. Do we want to use this new technology in critical applications such as nuclear weapons? This question drove us to understand the reliability and failure mechanisms of silicon surface-micromachined MEMS. Development of a testing infrastructure was a crucial step to perform reliability experiments on MEMS devices and will be reported here. In addition, reliability test structures have been designed and characterized. Many experiments were performed to investigate failure modes and specifically those in different environments (humidity, temperature, shock, vibration, and storage). A predictive reliability model for wear of rubbing surfaces in microengines was developed. The root causes of failure for operating and non-operating MEMS are discussed. The major failure mechanism for operating MEMS was wear of the polysilicon rubbing surfaces. Reliability design rules for future MEMS devices are established.

  15. Development of the micro pixel chamber based on MEMS technology

    Directory of Open Access Journals (Sweden)

    Takemura T.

    2018-01-01

    Full Text Available Micro pixel chambers (μ-PIC are gaseous two-dimensional imaging detectors originally manufactured using printed circuit board (PCB technology. They are used in MeV gamma-ray astronomy, medicalimaging, neutron imaging, the search for dark matter, and dose monitoring. The position resolution of the present μ-PIC is approximately 120 μm (RMS, however some applications require a fine position resolution of less than 100 μm. To this end, we have started to develop a μ-PIC based on micro electro mechanical system (MEMS technology, which provides better manufacturing accuracy than PCB technology. Our simulation predicted the gains of MEMS μ-PICs to be twice those of PCB μ-PICs at the same anode voltage. We manufactured two MEMS μ-PICs and tested them to study their behavior. In these experiments, we successfully operated the fabricatedMEMS μ-PICs and we achieved a maximum gain of approximately 7×103 and collected their energy spectra under irradiation of X-rays from 55Fe. However, the measured gains of the MEMS μ-PICs were less than half of the values predicted in the simulations. We postulated that the gains of the MEMS μ-PICs are diminished by the effect of the silicon used as a semiconducting substrate.

  16. Development of the micro pixel chamber based on MEMS technology

    Science.gov (United States)

    Takemura, T.; Takada, A.; Kishimoto, T.; Komura, S.; Kubo, H.; Matsuoka, Y.; Miuchi, K.; Miyamoto, S.; Mizumoto, T.; Mizumura, Y.; Motomura, T.; Nakamasu, Y.; Nakamura, K.; Oda, M.; Ohta, K.; Parker, J. D.; Sawano, T.; Sonoda, S.; Tanimori, T.; Tomono, D.; Yoshikawa, K.

    2018-02-01

    Micro pixel chambers (μ-PIC) are gaseous two-dimensional imaging detectors originally manufactured using printed circuit board (PCB) technology. They are used in MeV gamma-ray astronomy, medicalimaging, neutron imaging, the search for dark matter, and dose monitoring. The position resolution of the present μ-PIC is approximately 120 μm (RMS), however some applications require a fine position resolution of less than 100 μm. To this end, we have started to develop a μ-PIC based on micro electro mechanical system (MEMS) technology, which provides better manufacturing accuracy than PCB technology. Our simulation predicted the gains of MEMS μ-PICs to be twice those of PCB μ-PICs at the same anode voltage. We manufactured two MEMS μ-PICs and tested them to study their behavior. In these experiments, we successfully operated the fabricatedMEMS μ-PICs and we achieved a maximum gain of approximately 7×103 and collected their energy spectra under irradiation of X-rays from 55Fe. However, the measured gains of the MEMS μ-PICs were less than half of the values predicted in the simulations. We postulated that the gains of the MEMS μ-PICs are diminished by the effect of the silicon used as a semiconducting substrate.

  17. Digital reflection holography based systems development for MEMS testing

    Science.gov (United States)

    Singh, Vijay Raj; Liansheng, Sui; Asundi, Anand

    2010-05-01

    MEMS are tiny mechanical devices that are built onto semiconductor chips and are measured in micrometers and nanometers. Testing of MEMS device is an important part in carrying out their functional assessment and reliability analysis. Development of systems based on digital holography (DH) for MEMS inspection and characterization is presented in this paper. Two DH reflection systems, table-top and handheld types, are developed depending on the MEMS measurement requirements and their capabilities are presented. The methodologies for the systems are developed for 3D profile inspection and static & dynamic measurements, which is further integrated with in-house developed software that provides the measurement results in near real time. The applications of the developed systems are demonstrated for different MEMS devices for 3D profile inspection, static deformation/deflection measurements and vibration analysis. The developed systems are well suitable for the testing of MEMS and Microsystems samples, with full-field, static & dynamic inspection as well as to monitor micro-fabrication process.

  18. Performance Analysis of Alignment Process of MEMS IMU

    Directory of Open Access Journals (Sweden)

    Vadim Bistrov

    2012-01-01

    Full Text Available The procedure of determining the initial values of the attitude angles (pitch, roll, and heading is known as the alignment. Also, it is essential to align an inertial system before the start of navigation. Unless the inertial system is not aligned with the vehicle, the information provided by MEMS (microelectromechanical system sensors is not useful for navigating the vehicle. At the moment MEMS gyroscopes have poor characteristics and it’s necessary to develop specific algorithms in order to obtain the attitude information of the object. Most of the standard algorithms for the attitude estimation are not suitable when using MEMS inertial sensors. The wavelet technique, the Kalman filter, and the quaternion are not new in navigation data processing. But the joint use of those techniques for MEMS sensor data processing can give some new results. In this paper the performance of a developed algorithm for the attitude estimation using MEMS IMU (inertial measurement unit is tested. The obtained results are compared with the attitude output of another commercial GPS/IMU device by Xsens. The impact of MEMS sensor measurement noises on an alignment process is analysed. Some recommendations for the Kalman filter algorithm tuning to decrease standard deviation of the attitude estimation are given.

  19. MEMS IMU Error Mitigation Using Rotation Modulation Technique.

    Science.gov (United States)

    Du, Shuang; Sun, Wei; Gao, Yang

    2016-11-29

    Micro-electro-mechanical-systems (MEMS) inertial measurement unit (IMU) outputs are corrupted by significant sensor errors. The navigation errors of a MEMS-based inertial navigation system will therefore accumulate very quickly over time. This requires aiding from other sensors such as Global Navigation Satellite Systems (GNSS). However, it will still remain a significant challenge in the presence of GNSS outages, which are typically in urban canopies. This paper proposed a rotary inertial navigation system (INS) to mitigate navigation errors caused by MEMS inertial sensor errors when external aiding information is not available. A rotary INS is an inertial navigator in which the IMU is installed on a rotation platform. Application of proper rotation schemes can effectively cancel and reduce sensor errors. A rotary INS has the potential to significantly increase the time period that INS can bridge GNSS outages and make MEMS IMU possible to maintain longer autonomous navigation performance when there is no external aiding. In this research, several IMU rotation schemes (rotation about X-, Y- and Z-axes) are analyzed to mitigate the navigation errors caused by MEMS IMU sensor errors. As the IMU rotation induces additional sensor errors, a calibration process is proposed to remove the induced errors. Tests are further conducted with two MEMS IMUs installed on a tri-axial rotation table to verify the error mitigation by IMU rotations.

  20. Mechanical design control and implementation of a new movable intensity profile beamline monitor for the TRIUMF parity experiment 497

    Science.gov (United States)

    Ries, Thomas C.

    1995-05-01

    Two new movable beam intensity profile monitors have been installed into the TRIUMF Parity Experiment 497 Beamlines. Each unit serves two functions. Firstly, the beam median position, in a plane normal to the beam, is detected by split plate Secondary Emission Monitors. This information is used to lock the beam into the position of the movable monitor to within a few μm's via high band width ferrite core steering magnets operating in tandem in a closed loop servo feedback control system. Secondly, the beam profile and intensity is detected via a multi-wire secondary emission non-movable monitor, where the data provides high precision values regarding centroidal positions and profiles. The centroid position of the beam is statistically determined to an accuracy of ±10 μm from a data record length of 1 second. The design of each device adheres to strict standards of mechanically rigid construction. The split plate SEM accuracy and repeatability is better than 15 μm with an absolute resolution limit of 0.4 μm. Maximum travel is 2 inches in the vertical plane. Since the device is mechanically modular and both degrees of freedom are combined into a single mechanical unit, fast and easy handling is possible for maintenance in radioactive areas. The actuators are dc servo motors with tachometers driven by linear servo power amplifiers. These amplifiers are used in lieu of pulse width modulated amps to eliminate noise produced by the switching circuits. Position sensing is done by variable reluctance type absolute rotary encoders providing 16 bit resolution over the full range of travel. Positioning is done manually using a self centring potentiometer on the control panel that provides a ± velocity command signal to the power amplifiers. This configuration ensures good controllability over a very large range of positioning speeds hence making 0.4 μm incremental positioning possible, as well as, fast relocations over large relative distances. The precision movement

  1. MEMS packaging with etching and thinning of lid wafer to form lids and expose device wafer bond pads

    Science.gov (United States)

    Chanchani, Rajen; Nordquist, Christopher; Olsson, Roy H; Peterson, Tracy C; Shul, Randy J; Ahlers, Catalina; Plut, Thomas A; Patrizi, Gary A

    2013-12-03

    In wafer-level packaging of microelectromechanical (MEMS) devices a lid wafer is bonded to a MEMS wafer in a predermined aligned relationship. Portions of the lid wafer are removed to separate the lid wafer into lid portions that respectively correspond in alignment with MEMS devices on the MEMS wafer, and to expose areas of the MEMS wafer that respectively contain sets of bond pads respectively coupled to the MEMS devices.

  2. Age determination of the world’s oldest movable metal types through measuring the “meog” using AMS

    International Nuclear Information System (INIS)

    Hong, W.; Lee, S.C.; Park, J.H.; Park, G.; Sung, K.H.; Lee, J.G.; Nam, K.H.

    2015-01-01

    The fabrication year of a set of movable metal types that were thought to be used for printing “Jeungdoga” was investigated. Since the types were made from bronze and did not contain carbon, an organic black ink called “meog” was collected from the type surfaces to quantify their ages. The meog samples were collected from 34 metal types, and 27 ages were obtained. The youngest age was 798 ± 44 yrBP, and the oldest reasonable age was 1166 ± 43 yrBP. The weighted average after eliminating ages with poor statistics was 950 ± 28 yrBP. This age is 300 years older than that of the Jikji (AD 1377), which is a Buddhist document recognized as the world’s oldest document printed using metal types, and also older than that of the Gutenberg bible (AD 1450).

  3. Age determination of the world’s oldest movable metal types through measuring the “meog” using AMS

    Energy Technology Data Exchange (ETDEWEB)

    Hong, W., E-mail: whong@kigam.re.kr [Geochemical Analysis Center, Korea Institute of Geoscience and Mineral Resources (KIGAM), 124 Gwahang-no, Yuseong-gu, Daejeon 305-350 (Korea, Republic of); Department of Accelerator and Beam Nano Engineering, University of Science and Technology (UST), 217 Gajeong-ro, Yuseong-gu, Daejeon 305-333 (Korea, Republic of); Lee, S.C. [Cheongju Early Printing Museum, 866 Uncheon-dong, Hongdeok-gu, Cheongju, Chungbuk (Korea, Republic of); Park, J.H.; Park, G. [Geochemical Analysis Center, Korea Institute of Geoscience and Mineral Resources (KIGAM), 124 Gwahang-no, Yuseong-gu, Daejeon 305-350 (Korea, Republic of); Sung, K.H. [Geochemical Analysis Center, Korea Institute of Geoscience and Mineral Resources (KIGAM), 124 Gwahang-no, Yuseong-gu, Daejeon 305-350 (Korea, Republic of); Department of Accelerator and Beam Nano Engineering, University of Science and Technology (UST), 217 Gajeong-ro, Yuseong-gu, Daejeon 305-333 (Korea, Republic of); Lee, J.G. [Geochemical Analysis Center, Korea Institute of Geoscience and Mineral Resources (KIGAM), 124 Gwahang-no, Yuseong-gu, Daejeon 305-350 (Korea, Republic of); Nam, K.H. [Department of Library and Information Science, Kyungpook National University, 67 Kyungdaejungmun-no, Buk-gu, Daegu 702-701 (Korea, Republic of)

    2015-10-15

    The fabrication year of a set of movable metal types that were thought to be used for printing “Jeungdoga” was investigated. Since the types were made from bronze and did not contain carbon, an organic black ink called “meog” was collected from the type surfaces to quantify their ages. The meog samples were collected from 34 metal types, and 27 ages were obtained. The youngest age was 798 ± 44 yrBP, and the oldest reasonable age was 1166 ± 43 yrBP. The weighted average after eliminating ages with poor statistics was 950 ± 28 yrBP. This age is 300 years older than that of the Jikji (AD 1377), which is a Buddhist document recognized as the world’s oldest document printed using metal types, and also older than that of the Gutenberg bible (AD 1450).

  4. Design and construction of the movable limiters for holding the plasma in position in the nuclear fusion experiment TEXTOR

    International Nuclear Information System (INIS)

    Butzek, D.A.; Derichs, K.

    1983-11-01

    The nuclear fusion experiment TEXTOR (Tokamak Experiment for Technology Oriented Research) has been constructed for investigation of plasma-wall-interaction. The plasma is generated inside a torus-shaped vacuum vessel. In addition to the magnetic fields mechanical limiters are provided to hold the plasma in position. The limiter scheme of textor consists of main limiters and reference limiters (measuring limiters). Main and reference limiters are mounted in different cross sections of the torus. The main limiters are movable during the plasma discharge while the reference limiters are kept fixed. They are adjustable. Thus, by moving the main limiters, the reference limiters can be exposed to different thermal loads during the discharge. Exposing the reference limiters to the plasma, first results have been obtained concerning the scrape off layer: thickness, fluxes of hydrogen and chromium through this layer. The limiter scheme, the final design and construction of the limiters and the first phase of operation are described in this report. (orig.) [de

  5. Publicity in secured transactions law: Towards a European public notice filing system for non-possessory security rights in movable assets?

    NARCIS (Netherlands)

    Hamwijk, D.J.Y.

    2014-01-01

    There is a growing call to introduce a European public notice filing system for security rights in movable goods comparable to the notice filing system of Art. 9 UCC. A proposal to this effect has been adopted in Book IX DCFR, which represents a comprehensive framework of rules for proprietary

  6. The movable polarized target as a basic equipment for high energy spin physics experiments at the JINR-Dubna accelerator complex

    Energy Technology Data Exchange (ETDEWEB)

    Lehar, F.; Adiasevich, B.; Androsov, V.P.; Angelov, N.; Anischenko, N.; Antonenko, V.; Ball, J.; Baryshevsky, V.G.; Bazhanov, N.A.; Belyaev, A.A.; Benda, B.; Bodyagin, V.; Borisov, N.; Borzunov, Yu.; Bradamante, F.; Bunyatova, E.; Burinov, V.; Chernykh, E.; Combet, M.; Datskov, A.; Durand, G.; Dzyubak, A.P.; Fontaine, J.M.; Get`man, V.A.; Giorgi, M.; Golovanov, L.; Grebenyuk, V.; Grosnick, D.; Gurevich, G.; Hasegawa, T.; Hill, D.; Horikawa, N.; Igo, G.; Janout, Z.; Kalinnikov, V.A.; Karnaukhov, I.M.; Kasprzyk, T.; Khachaturov, B.A.; Kirillov, A.; Kisselev, Yu.; Kousmine, E.S.; Kovalenko, A.; Kovaljov, A.I.; Ladygin, V.P.; Lazarev, A.; Leconte, P.; Lesquen, A. de; Lukhanin, A.A.; Mango, S.; Martin, A.; Matafonov, V.N.; Matyushevsky, E.; Mironov, S.; Neganov, A.B.; Neganov, B.S.; Nomofilov, A.; Perelygin, V.; Plis, Yu.; Pilipenko, Yu.; Pisarev, I.L.; Piskunov, N.; Polunin, Yu.; Popkov, Yu.P.; Propov, A.A.; Prokofiev, A.N.; Rekalo, M.P.; Rukoyatkin, P.; Sans, J.L.; Sapozhnikov, M.G.; Sharov, V.; Shilov, S.; Shishov, Yu.; Sitnik, I.M.; Sorokin, P.V.; Spinka, H.; Sporov, E.A.; Strunov, L.N.; Svetov, A.; De Swart, J.J.; Telegin, Yu.P.; Tolmashov, I.; Trentalange, S.; Tsvinev, A.; Usov, Yu.A.; Vikhrov, V.V.; Whitten, C.A.; Zaporozhets, S.; Zarubin, A.; Zhdanov, A.A.; Zolin, L. [CEA Centre d`Etudes Nucleaires de Saclay, 91 - Gif-sur-Yvette (France). Dept. d`Astrophysique, de Physique des Particules, de Physique Nucleaire et de l`Instrumentation Associee]|[I.V. Kurchatov Inst. of Atomic Energy, Moscow (Russian Federation)]|[Kharkov Inst. of Physics and Technology (Russian Federation)]|[Lab. of Nuclear Problems, JINR, Dubna (Russian Federation)]|[Lab. of High Energy Physics, JINR, Dubna (Russian Federation)]|[Lab. National SATURNE, CNRS, 91 - Gif-sur-Yvette (France)]|[Inst. of Physics, Belarus Academy of Sciences, Minsk (Belarus)]|[Dept. of Physics, Petersburg Nuclear Physics Inst., Gatchina (Russian Federation)

    1995-03-01

    A movable polarized proton target is planned to be installed in polarized beams of the Synchrophasotron-Nuclotron complex in order to carry out a spin physics experimental program at Dubna. The project is described and the first proposed experiments are discussed. ((orig.))

  7. The movable polarized target as a basic equipment for high energy spin physics experiments at the JINR-Dubna accelerator complex

    International Nuclear Information System (INIS)

    Lehar, F.; Adiasevich, B.; Androsov, V.P.; Angelov, N.; Anischenko, N.; Antonenko, V.; Ball, J.; Baryshevsky, V.G.; Bazhanov, N.A.; Belyaev, A.A.; Benda, B.; Bodyagin, V.; Borisov, N.; Borzunov, Yu.; Bradamante, F.; Bunyatova, E.; Burinov, V.; Chernykh, E.; Combet, M.; Datskov, A.; Durand, G.; Dzyubak, A.P.; Fontaine, J.M.; Get'man, V.A.; Giorgi, M.; Golovanov, L.; Grebenyuk, V.; Grosnick, D.; Gurevich, G.; Hasegawa, T.; Hill, D.; Horikawa, N.; Igo, G.; Janout, Z.; Kalinnikov, V.A.; Karnaukhov, I.M.; Kasprzyk, T.; Khachaturov, B.A.; Kirillov, A.; Kisselev, Yu.; Kousmine, E.S.; Kovalenko, A.; Kovaljov, A.I.; Ladygin, V.P.; Lazarev, A.; Leconte, P.; Lesquen, A. de; Lukhanin, A.A.; Mango, S.; Martin, A.; Matafonov, V.N.; Matyushevsky, E.; Mironov, S.; Neganov, A.B.; Neganov, B.S.; Nomofilov, A.; Perelygin, V.; Plis, Yu.; Pilipenko, Yu.; Pisarev, I.L.; Piskunov, N.; Polunin, Yu.; Popkov, Yu.P.; Propov, A.A.; Prokofiev, A.N.; Rekalo, M.P.; Rukoyatkin, P.; Sans, J.L.; Sapozhnikov, M.G.; Sharov, V.; Shilov, S.; Shishov, Yu.; Sitnik, I.M.; Sorokin, P.V.; Spinka, H.; Sporov, E.A.; Strunov, L.N.; Svetov, A.; De Swart, J.J.; Telegin, Yu.P.; Tolmashov, I.; Trentalange, S.; Tsvinev, A.; Usov, Yu.A.; Vikhrov, V.V.; Whitten, C.A.; Zaporozhets, S.; Zarubin, A.; Zhdanov, A.A.; Zolin, L.

    1995-01-01

    A movable polarized proton target is planned to be installed in polarized beams of the Synchrophasotron-Nuclotron complex in order to carry out a spin physics experimental program at Dubna. The project is described and the first proposed experiments are discussed. ((orig.))

  8. The movable polarized target as a basic equipment for high energy spin physics experiments at the JINR-Dubna accelerator complex

    Science.gov (United States)

    Lehar, F.; Adiasevich, B.; Androsov, V. P.; Angelov, N.; Anischenko, N.; Antonenko, V.; Ball, J.; Baryshevsky, V. G.; Bazhanov, N. A.; Belyaev, A. A.; Benda, B.; Bodyagin, V.; Borisov, N.; Borzunov, Yu.; Bradamante, F.; Bunyatova, E.; Burinov, V.; Chernykh, E.; Combet, M.; Datskov, A.; Durand, G.; Dzyubak, A. P.; Fontaine, J. M.; Get'man, V. A.; Giorgi, M.; Golovanov, L.; Grebenyuk, V.; Grosnick, D.; Gurevich, G.; Hasegawa, T.; Hill, D.; Horikawa, N.; Igo, G.; Janout, Z.; Kalinnikov, V. A.; Karnaukhov, I. M.; Kasprzyk, T.; Khachaturov, B. A.; Kirillov, A.; Kisselev, Yu.; Kousmine, E. S.; Kovalenko, A.; Kovaljov, A. I.; Ladygin, V. P.; Lazarev, A.; Leconte, Ph.; de Lesquen, A.; Lukhanin, A. A.; Mango, S.; Martin, A.; Matafonov, V. N.; Matyushevsky, E.; Mironov, S.; Neganov, A. B.; Neganov, B. S.; Nomofilov, A.; Perelygin, V.; Plis, Yu.; Pilipenko, Yu.; Pisarev, I. L.; Piskunov, N.; Polunin, Yu.; Popkov, Yu. P.; Propov, A. A.; Prokofiev, A. N.; Rekalo, M. P.; Rukoyatkin, P.; Sans, J. L.; Sapozhnikov, M. G.; Sharov, V.; Shilov, S.; Shishov, Yu.; Sitnik, I. M.; Sorokin, P. V.; Spinka, H.; Sporov, E. A.; Strunov, L. N.; Svetov, A.; de Swart, J. J.; Telegin, Yu. P.; Tolmashov, I.; Trentalange, S.; Tsvinev, A.; Usov, Yu. A.; Vikhrov, V. V.; Whitten, C. A.; Zaporozhets, S.; Zarubin, A.; Zhdanov, A. A.; Zolin, L.

    1995-02-01

    A movable polarized proton target is planned to be installed in polarized beams of the Synchrophasotron-Nuclotron complex in order to carry out a spin physics experimental program at Dubna. The project is described and the first proposed experiments are discussed.

  9. Eco toxicological assessment of the usage of chemical meliorants and fertilizers on the content of movable fluorine in humus shallow solonetz of the Northern Kazakhstan

    International Nuclear Information System (INIS)

    Sarsenova, A.A.; Ermokhin, Yu.I.; Kazantsev, N.Ya.

    2008-01-01

    The aim of present research is the assessment of the ecological rate setting of chemical meliorants and fertilizers using for melioration of solonetz. The scientific problem of work is the study of influence of chemical meliorants, phosphogypsum doses and nitrogen fertilizer on the content of movable fluorine in soil.

  10. Generation of moving trajectory based on movable posture map of robot hand; Robotto no kashisei mappu ni motozuku robotto no dosa kiseki seisei system

    Energy Technology Data Exchange (ETDEWEB)

    Fujimoto, K.; Nakata, S. [Osaka Univ., Osaka (Japan). Faculty of Engineering; Kameyama, M. [Kansai Electric Power Co., Inc., Osaka (Japan)

    1996-05-05

    In this study, a plan of robotic movement was mainly investigated. An expression method of a movable posture region map of a robot was proposed, and a system in which the moving trajectory of the robot was automatically generated was constructed based on the posture region data expressed by the map. The main results were obtained as follows: In the case of a n-axes vertical revolute robot, where the first axis is the rotation axis and the second is the revolution axis, a movable posture region can be easily transferred and referred for all points in a robot moving space by using the position of the endeffector to the X{sub r} axis connecting the rotation center of the second axis with the robot point and the movable posture map. From the posture angle data in the position of the endeffector obtained by rotating when all rotation axes of the robot were under each minimum driving rotation angle, the common n-axes movable posture map of the robot can be easily made by selecting maximum and minimum posture angles in a distance of X{sub 0} on the X{sub r} axis. 13 refs., 8 refs.

  11. A Novel Microdialysis Glucose Sensor System Based on Co-immobilizing on AU Micro-Electrode by SOL-GEL Technique

    National Research Council Canada - National Science Library

    Yu, Ping

    2001-01-01

    .... The sensor is based on co_immobilizing glucose oxidase (COD) with the catalase by sol-gel technique on the surface of the silicon bases with two pattern of An microelectrodes. A graduated ("sandwich...

  12. Residual Stress and Fracture of PECVD Thick Oxide Films for Power MEMS Structures and Devices

    National Research Council Canada - National Science Library

    Zhang, Xin

    2007-01-01

    ...) in MEMS devices and structures. In this project, PECVD SiOx is chosen as an example for the systematic study of mechanical behavior and underlying casual mechanisms of amorphous thin films for MEMS applications, which are generally...

  13. Microelectrode voltammetry of multi-electron transfers complicated by coupled chemical equilibria: a general theory for the extended square scheme.

    Science.gov (United States)

    Laborda, Eduardo; Gómez-Gil, José María; Molina, Angela

    2017-06-28

    A very general and simple theoretical solution is presented for the current-potential-time response of reversible multi-electron transfer processes complicated by homogeneous chemical equilibria (the so-called extended square scheme). The expressions presented here are applicable regardless of the number of electrons transferred and coupled chemical processes, and they are particularized for a wide variety of microelectrode geometries. The voltammetric response of very different systems presenting multi-electron transfers is considered for the most widely-used techniques (namely, cyclic voltammetry, square wave voltammetry, differential pulse voltammetry and steady state voltammetry), studying the influence of the microelectrode geometry and the number and thermodynamics of the (electro)chemical steps. Most appropriate techniques and procedures for the determination of the 'interaction' between successive transfers are discussed. Special attention is paid to those situations where homogeneous chemical processes, such as protonation, complexation or ion association, affect the electrochemical behaviour of the system by different stabilization of the oxidation states.

  14. Field Tests of a Portable MEMS Gravimeter

    Directory of Open Access Journals (Sweden)

    Richard P. Middlemiss

    2017-11-01

    Full Text Available Gravimeters are used to measure density anomalies under the ground. They are applied in many different fields from volcanology to oil and gas exploration, but present commercial systems are costly and massive. A new type of gravity sensor has been developed that utilises the same fabrication methods as those used to make mobile phone accelerometers. In this study, we describe the first results of a field-portable microelectromechanical system (MEMS gravimeter. The stability of the gravimeter is demonstrated through undertaking a multi-day measurement with a standard deviation of 5.58 × 10 − 6 ms − 2 . It is then demonstrated that a change in gravitational acceleration of 4.5 × 10 − 5 ms − 2 can be measured as the device is moved between the top and the bottom of a 20.7 m lift shaft with a signal-to-noise ratio (SNR of 14.25. Finally, the device is demonstrated to be stable in a more harsh environment: a 4.5 × 10 − 4 ms − 2 gravity variation is measured between the top and bottom of a 275-m hill with an SNR of 15.88. These initial field-tests are an important step towards a chip-sized gravity sensor.

  15. Nonlinear Dynamics of Electrostatically Actuated MEMS Arches

    KAUST Repository

    Al Hennawi, Qais M.

    2015-05-01

    In this thesis, we present theoretical and experimental investigation into the nonlinear statics and dynamics of clamped-clamped in-plane MEMS arches when excited by an electrostatic force. Theoretically, we first solve the equation of motion using a multi- mode Galarkin Reduced Order Model (ROM). We investigate the static response of the arch experimentally where we show several jumps due to the snap-through instability. Experimentally, a case study of in-plane silicon micromachined arch is studied and its mechanical behavior is measured using optical techniques. We develop an algorithm to extract various parameters that are needed to model the arch, such as the induced axial force, the modulus of elasticity, and the initially induced initial rise. After that, we excite the arch by a DC electrostatic force superimposed to an AC harmonic load. A softening spring behavior is observed when the excitation is close to the first resonance frequency due to the quadratic nonlinearity coming from the arch geometry and the electrostatic force. Also, a hardening spring behavior is observed when the excitation is close to the third (second symmetric) resonance frequency due to the cubic nonlinearity coming from mid-plane stretching. Then, we excite the arch by an electric load of two AC frequency components, where we report a combination resonance of the summed type. Agreement is reported among the theoretical and experimental work.

  16. DMD reliability: a MEMS success story

    Science.gov (United States)

    Douglass, Michael

    2003-01-01

    The Digital Micromirror Device (DMD) developed by Texas Instruments (TI) has made tremendous progress in both performance and reliability since it was first invented in 1987. From the first working concept of a bistable mirror, the DMD is now providing high-brightness, high-contrast, and high-reliability in over 1,500,000 projectors using Digital Light Processing technology. In early 2000, TI introduced the first DMD chip with a smaller mirror (14-micron pitch versus 17-micron pitch). This allowed a greater number of high-resolution DMD chips per wafer, thus providing an increased output capacity as well as the flexibility to use existing package designs. By using existing package designs, subsequent DMDs cost less as well as met our customers' demand for faster time to market. In recent years, the DMD achieved the status of being a commercially successful MEMS device. It reached this status by the efforts of hundreds of individuals working toward a common goal over many years. Neither textbooks nor design guidelines existed at the time. There was little infrastructure in place to support such a large endeavor. The knowledge we gained through our characterization and testing was all we had available to us through the first few years of development. Reliability was only a goal in 1992 when production development activity started; a goal that many throughout the industry and even within Texas Instruments doubted the DMD could achieve. The results presented in this paper demonstrate that we succeeded by exceeding the reliability goals.

  17. Modular packaging concept for MEMS and MOEMS

    Science.gov (United States)

    Stenchly, Vanessa; Reinert, Wolfgang; Quenzer, Hans-Joachim

    2017-11-01

    Wherever technical systems detect objects in their environment or interact with people, optical devices may play an important role. Light can be relatively easily produced and spatially and temporally modulated. Laser can project sharp images over long distances or cut materials in short distances. Depending on the wavelength an invisible scanning in near infrared for gesture recognition is possible as well as a projection of brilliant colour images. For several years, the Fraunhofer ISIT develops Opto-Packaging processes based on the viscous reshaping of glass wafers: First, hermetically sealed laser micro-mirror scanners WLP with inclined windows deflect in the central light reflex of the window out of the image area. Second, housing with lateral light exit permits hermetic sealing of edge-emitting lasers for highest reliability and durability. Such systems are currently experiencing an extremely high interest of the industry in all segments, from consumer to automotive through to materials processing. Our modular Opto-Packaging platform enables fast product developments. Housing for opto mechanical MEMS devices are equipped with inclined windows to minimize distortion, stray light and reflection losses. The hot viscous glass forming technology is also applied to functionalized substrate wafers which possess areas with high heat dissipation in addition to thermally insulating areas. Electrical contacts may be realized with metal filled vias or TGV (Through Glass Vias). The modular system reduces the development times for new, miniaturized optical systems so that manufacturers can focus on the essentials in their development, namely their product functionalities.

  18. Smartphone MEMS accelerometers and earthquake early warning

    Science.gov (United States)

    Kong, Q.; Allen, R. M.; Schreier, L.; Kwon, Y. W.

    2015-12-01

    The low cost MEMS accelerometers in the smartphones are attracting more and more attentions from the science community due to the vast number and potential applications in various areas. We are using the accelerometers inside the smartphones to detect the earthquakes. We did shake table tests to show these accelerometers are also suitable to record large shakings caused by earthquakes. We developed an android app - MyShake, which can even distinguish earthquake movements from daily human activities from the recordings recorded by the accelerometers in personal smartphones and upload trigger information/waveform to our server for further analysis. The data from these smartphones forms a unique datasets for seismological applications, such as earthquake early warning. In this talk I will layout the method we used to recognize earthquake-like movement from single smartphone, and the overview of the whole system that harness the information from a network of smartphones for rapid earthquake detection. This type of system can be easily deployed and scaled up around the global and provides additional insights of the earthquake hazards.

  19. MEMS DM development at Iris AO, Inc.

    Science.gov (United States)

    Helmbrecht, Michael A.; He, Min; Kempf, Carl J.; Besse, Marc

    2011-03-01

    Iris AO is actively developing piston-tip-tilt (PTT) segmented MEMS deformable mirrors (DM) and adaptive optics (AO) controllers for these DMs. This paper discusses ongoing research at Iris AO that has advanced the state-of-the-art of these devices and systems over the past year. Improvements made to open-loop operation and mirror fabrication enables mirrors to open-loop flatten to 4 nm rms. Additional testing of an anti snap-in technology was conducted and demonstrates that the technology can withstand 100 million snap-in events without failure. Deformable mirrors with dielectric coatings are shown that are capable of handling 630 W/cm2 of incident laser power. Over a localized region on the segment, the dielectric coatings can withstand 100kW/cm2 incident laser power for 30 minutes. Results from the first-ever batch of PTT489 DMs that were shipped to pilot customers are reported. Optimizations made to the open-loop PTT controller are shown to have latencies of 157.5 μs and synchronous array update rates of nearly 6.5 kHz. Finally, plans for the design and fabrication of the next-generation PTT939 DM are presented.

  20. Field Tests of a Portable MEMS Gravimeter.

    Science.gov (United States)

    Middlemiss, Richard P; Bramsiepe, Steven G; Douglas, Rebecca; Hough, James; Paul, Douglas J; Rowan, Sheila; Hammond, Giles D

    2017-11-08

    Gravimeters are used to measure density anomalies under the ground. They are applied in many different fields from volcanology to oil and gas exploration, but present commercial systems are costly and massive. A new type of gravity sensor has been developed that utilises the same fabrication methods as those used to make mobile phone accelerometers. In this study, we describe the first results of a field-portable microelectromechanical system (MEMS) gravimeter. The stability of the gravimeter is demonstrated through undertaking a multi-day measurement with a standard deviation of 5.58 × 10 - 6 ms - 2 . It is then demonstrated that a change in gravitational acceleration of 4.5 × 10 - 6 ms - 2 can be measured as the device is moved between the top and the bottom of a 20.7 m lift shaft with a signal-to-noise ratio (SNR) of 14.25. Finally, the device is demonstrated to be stable in a more harsh environment: a 4.5 × 10 - 4 ms - 2 gravity variation is measured between the top and bottom of a 275-m hill with an SNR of 15.88. These initial field-tests are an important step towards a chip-sized gravity sensor.

  1. MEMS tandem ion-sorption micropump

    Science.gov (United States)

    Grzebyk, T.

    2017-12-01

    This paper presents a two-stage MEMS ion-sorption micropump, which works in a wide range of pressures—it allows efficient evacuation of gases from the internal volume of any microsystem starting from atmospheric pressure down to 10‑6 hPa. The miniature pre-vacuum pump is realized as a two-electrode silicon–glass structure with a very close inter-electrode distance. The use of the silicon substrate as a getter material instead of a metallic layer significantly increases the pumping capacity and as a result, the initial pressure can be reduced to a level of 1 hPa. From this point the pumping is continued with the second glow-discharge high vacuum micropump. This pump is a multilayer structure, in which ions are trapped in crossed electric and magnetic fields. It allows further reduction of pressure down to 10‑6 hPa. Both pumps are technologically compatible and together they enable the on-chip generation of avacuum at the desired level in a variety of miniaturized devices.

  2. MEMS Logic Using Mixed-Frequency Excitation

    KAUST Repository

    Ilyas, Saad

    2017-06-22

    We present multi-function microelectromechanical systems (MEMS) logic device that can perform the fundamental logic gate AND, OR, universal logic gates NAND, NOR, and a tristate logic gate using mixed-frequency excitation. The concept is based on exciting combination resonances due to the mixing of two or more input signals. The device vibrates at two steady states: a high state when the combination resonance is activated and a low state when no resonance is activated. These vibration states are assigned to logical value 1 or 0 to realize the logic gates. Using ac signals to drive the resonator and to execute the logic inputs unifies the input and output wave forms of the logic device, thereby opening the possibility for cascading among logic devices. We found that the energy consumption per cycle of the proposed logic resonator is higher than those of existing technologies. Hence, integration of such logic devices to build complex computational system needs to take into consideration lowering the total energy consumption. [2017-0041

  3. Differentially-driven MEMS spatial light modulator

    Science.gov (United States)

    Stappaerts, Eddy A.

    2004-09-14

    A MEMS SLM and an electrostatic actuator associated with a pixel in an SLM. The actuator has three electrodes: a lower electrode; an upper electrode fixed with respect to the lower electrode; and a center electrode suspended and actuable between the upper and lower electrodes. The center electrode is capable of resiliently-biasing to restore the center electrode to a non-actuated first equilibrium position, and a mirror is operably connected to the center electrode. A first voltage source provides a first bias voltage across the lower and center electrodes and a second voltage source provides a second bias voltage across the upper and center electrodes, with the first and second bias voltages determining the non-actuated first equilibrium position of the center electrode. A third voltage source provides a variable driver voltage across one of the lower/center and upper/center electrode pairs in series with the corresponding first or second bias voltage, to actuate the center electrode to a dynamic second equilibrium position.

  4. MEMS based impedimetric sensing of phthalates

    KAUST Repository

    Zia, Asif I.

    2013-05-01

    Phthalate esters are known ubiquitous teratogenic and carcinogenic environmental and food pollutants. Their detection and quantification is strictly laboratory based, time consuming, expensive and professionally handled procedure. Presented research work describes a real time non-invasive detection technique for phthalates detection in ethanol, water and drinks. The new type of inter-digital sensor design incorporating multiple sensing gold electrodes were fabricated on silicon substrate based on thin film micro-electromechanical system (MEMS) using semiconductor device fabrication technology. A passivation layer of Silicon Nitride (Si3N4) was used to functionalize the sensor. Various concentrations (0.1 to 20ppm) of DINP (di-isononyl phthalates) in ethanol and di (2-ethylhexyl) phthalate (DEHP) in deionized MilliQ water were subjected to the testing system by dip testing method. Electrochemical impedance spectroscopy (EIS) technique was used to obtain impedance spectra in order to determine sample conductance for evaluation of its dielectric properties. The impedance spectra so obtained showed that the sensor was able to detect the presence of phthalates in the samples distinctively. Electrochemical Spectrum Analyser was used to model the experimentally obtained impedance spectra by curve fitting technique to figure out Constant Phase Element (CPE) equivalent circuit. Locally available energy drink and juice was added with phthalates in concentrations of 2, 6 and 10ppm to observe the performance of the sensor in such products. Experimental results showed that the new sensor was able to detect different concentrations of phthalates in energy drinks. © 2013 IEEE.

  5. Effect of island shape on dielectrophoretic assembly of metal nanoparticle chains in a conductive-island-based microelectrode system

    International Nuclear Information System (INIS)

    Ding, Haitao; Shao, Jinyou; Ding, Yucheng; Liu, Weiyu; Li, Xiangming; Tian, Hongmiao; Zhou, Yaopei

    2015-01-01

    Highlights: • Conductive island shape influences the dynamic process occurring in DEP assembly of 10 nm gold nanoparticles in a conductive-island-based microelectrode system. • The DEP-assembled nanoparticle wires form a straighter conduction path with the increase in the geometric angle of conductive island tip. • The different island shapes distort the DEP force distribution and increase the local electrothermally induced fluid flow to different extents, which is important for the morphology and electrical conductance quality of the DEP-assembled metal nanoparticle chains. - Abstract: The electrical conduction quality of an electric circuit connection formed by dielectrophoretic (DEP)-assembled metal nanoparticle wires between small conductive elements plays a significant role in electronic devices. One of the major challenges for improving the electrical conductance of nanowires is optimizing their geometric morphology. So far, the electrical conduction quality has been enhanced by optimizing the AC frequency and conductivity of nanoparticle suspensions. Herein, the effect of the conductive island shapes on the dynamic process occurring in a DEP assembly of 10 nm gold nanoparticles was investigated in a conductive-island-based microelectrode system. The nanoparticle wires between the microelectrodes were assembled in situ from colloidal suspensions. The wires were grown in a much straighter route by increasing the geometric angle of the conductive-island tip. To validate the experiments, the effects of mutual DEP interactions and electrothermally induced fluid flow on the dynamic behavior of particle motion for different island geometric configurations in the conductive-island-based microelectrode system were determined by numerical simulations. The simulation results are consistent with those of experiments. This indicates that different conductive island shapes change the distribution of DEP force and increase the electrothermally induced fluid flow to

  6. Magnetron sputtered diamond-like carbon microelectrodes for on-chip measurement of quantal catecholamine release from cells

    OpenAIRE

    Gao, Yuanfang; Chen, Xiaohui; Gupta, Sanju; Gillis, Kevin D.; Gangopadhyay, Shubhra

    2008-01-01

    Carbon electrodes are widely used in electrochemistry due to their low cost, wide potential window, and low and stable background noise. Carbon-fiber electrodes (CFE) are commonly used to electrochemically measure “quantal” catecholamine release via exocytosis from individual cells, but it is difficult to integrate CFEs into lab-on-a-chip devices. Here we report the development of nitrogen doped diamond-like carbon (DLC:N) microelectrodes on a chip to monitor quantal release of catecholamines...

  7. Electrochemical Synthesis of N-Methylpyrrole and N-Methylcarbazole Copolymer on Carbon Fiber Microelectrodes, and Their Characterization

    OpenAIRE

    SARAÇ, A. Sezai; DOĞRU, Erkan; ATEŞ, Murat; PARLAK, Elif ALTÜRK

    2014-01-01

    Copolymer films of N-methylpyrrole (N-MPy) and N-methylcarbazole (N-MCz) were synthesized electrochemically onto single carbon fiber microelectrodes (CFMEs). Deposition conditions on the carbon fiber, influence of the monomer concentrations on the copolymerization of P[N-methylpyrrole-co-N-methylcarbazole] P[N-MPy-co-N-MCz], and the electrochemistry of the resulting homopolymer and copolymers were studied using cyclic voltammetry, FTIR-ATR, in-situ spectroelectrochemistry, a UV-vis sp...

  8. Poly-SiGe for MEMS-above-CMOS sensors

    CERN Document Server

    Gonzalez Ruiz, Pilar; Witvrouw, Ann

    2014-01-01

    Polycrystalline SiGe has emerged as a promising MEMS (Microelectromechanical Systems) structural material since it provides the desired mechanical properties at lower temperatures compared to poly-Si, allowing the direct post-processing on top of CMOS. This CMOS-MEMS monolithic integration can lead to more compact MEMS with improved performance. The potential of poly-SiGe for MEMS above-aluminum-backend CMOS integration has already been demonstrated. However, aggressive interconnect scaling has led to the replacement of the traditional aluminum metallization by copper (Cu) metallization, due to its lower resistivity and improved reliability. Poly-SiGe for MEMS-above-CMOS sensors demonstrates the compatibility of poly-SiGe with post-processing above the advanced CMOS technology nodes through the successful fabrication of an integrated poly-SiGe piezoresistive pressure sensor, directly fabricated above 0.13 m Cu-backend CMOS. Furthermore, this book presents the first detailed investigation on the influence o...

  9. Gamma-ray irradiation of ohmic MEMS switches

    Science.gov (United States)

    Maciel, John J.; Lampen, James L.; Taylor, Edward W.

    2012-10-01

    Radio Frequency (RF) Microelectromechanical System (MEMS) switches are becoming important building blocks for a variety of military and commercial applications including switch matrices, phase shifters, electronically scanned antennas, switched filters, Automatic Test Equipment, instrumentation, cell phones and smart antennas. Low power consumption, large ratio of off-impedance to on-impedance, extreme linearity, low mass, small volume and the ability to be integrated with other electronics makes MEMS switches an attractive alternative to other mechanical and solid-state switches for a variety of space applications. Radant MEMS, Inc. has developed an electrostatically actuated broadband ohmic microswitch that has applications from DC through the microwave region. Despite the extensive earth based testing, little is known about the performance and reliability of these devices in space environments. To help fill this void, we have irradiated our commercial-off-the-shelf SPST, DC to 40 GHz MEMS switches with gamma-rays as an initial step to assessing static impact on RF performance. Results of Co-60 gamma-ray irradiation of the MEMS switches at photon energies ≥ 1.0 MeV to a total dose of ~ 118 krad(Si) did not show a statistically significant post-irradiation change in measured broadband, RF insertion loss, insertion phase, return loss and isolation.

  10. Memória de longo prazo modulada pela memória de curto prazo

    Directory of Open Access Journals (Sweden)

    Viviane Moreira-Aguiar

    2008-01-01

    Full Text Available Quando um estímulo ocorre aleatoriamente à esquerda ou à direita, a resposta é mais rápida quando estímulo e resposta estão no mesmo lado (condição compatível do que em lados opostos (condição incompatível. Na tarefa de Simon, embora a resposta seja selecionada pela forma (ou cor do estímulo, a posição deste influencia o Tempo de Reação Manual (TRM. O efeito Simon corresponde à diferença entre as médias dos TRMs nas duas condições (incompatível e compatível. Neste trabalho, estudamos como uma tarefa prévia de compatibilidade realizada com um dedo indicador modula o efeito Simon. Vinte e oito voluntários realizaram uma tarefa de compatibilidade seguida pela tarefa de Simon. No grupo compatível (14 voluntários, encontramos um efeito Simon de 24 ms. No incompatível (14 voluntários, ocorreu um efeito Simon inverso de -16 ms. Estes resultados mostram uma modulação da memória de longo prazo por uma tarefa envolvendo a memória de curto prazo.

  11. Signal processing methods for reducing artifacts in microelectrode brain recordings caused by functional electrical stimulation.

    Science.gov (United States)

    Young, D; Willett, F; Memberg, W D; Murphy, B; Walter, B; Sweet, J; Miller, J; Hochberg, L R; Kirsch, R F; Ajiboye, A B

    2018-04-01

    Functional electrical stimulation (FES) is a promising technology for restoring movement to paralyzed limbs. Intracortical brain-computer interfaces (iBCIs) have enabled intuitive control over virtual and robotic movements, and more recently over upper extremity FES neuroprostheses. However, electrical stimulation of muscles creates artifacts in intracortical microelectrode recordings that could degrade iBCI performance. Here, we investigate methods for reducing the cortically recorded artifacts that result from peripheral electrical stimulation. One participant in the BrainGate2 pilot clinical trial had two intracortical microelectrode arrays placed in the motor cortex, and thirty-six stimulating intramuscular electrodes placed in the muscles of the contralateral limb. We characterized intracortically recorded electrical artifacts during both intramuscular and surface stimulation. We compared the performance of three artifact reduction methods: blanking, common average reference (CAR) and linear regression reference (LRR), which creates channel-specific reference signals, composed of weighted sums of other channels. Electrical artifacts resulting from surface stimulation were 175  ×  larger than baseline neural recordings (which were 110 µV peak-to-peak), while intramuscular stimulation artifacts were only 4  ×  larger. The artifact waveforms were highly consistent across electrodes within each array. Application of LRR reduced artifact magnitudes to less than 10 µV and largely preserved the original neural feature values used for decoding. Unmitigated stimulation artifacts decreased iBCI decoding performance, but performance was almost completely recovered using LRR, which outperformed CAR and blanking and extracted useful neural information during stimulation artifact periods. The LRR method was effective at reducing electrical artifacts resulting from both intramuscular and surface FES, and almost completely restored iBCI decoding

  12. The use of microelectrodes in the study of localized corrosion of aluminum 6111-like alloys

    Science.gov (United States)

    Abdullah, Aboubakr M.

    This thesis is classified into four chapters. While chapter 1 is only an introductory chapter that summarizes the two mechanisms that are trying to explain localized corrosion of metals and alloys, Chapter 4 is the conclusions and future work chapter that presents the new achievements that have been added to the field of corrosion science by this work besides the proposed work to be done in the future. In chapter 2, Crevice corrosion of an experimental Al 6111-like alloy with 0.68% Cu has been studied using potentiodynamic and potentiostatic techniques in different concentrations of sodium chloride and in 0.1M nitric acid solutions. Potentiodynamic experiments show that the alloy has an active/passive transition in a saturated sodium chloride solution at elevated temperatures (90 and 70°C). Also, a steep electrode potential gradient, E(x), within the crevice has been measured using a microprobe connected to a SCE and controlled by a 3-D manipulator, and the observed locations of corrosion on the crevice wall are similar to the locations seen previously for systems in which it was clear that the shift of E(x) into the active peak region of the polarization curve on the crevice wall stabilized the crevice corrosion process. In chapter 3, focuses on the corrosion of a peak aged aluminum 6111-like alloy of 1.47% copper using the artificial pit configuration (pencil electrode) with relatively larger specimens in the form of plates rather than wires. The sample which was flush with the surface of the epoxy resin mount was anodically polarized in neutral NaCl solutions of different concentrations and pH 6.9. The alloy dissolved uniformly at a certain rate to form a local cell with epoxy resin walls and the alloy surface as its bottom. The potential drop profile within the cavity was recorded on a daily basis. It showed that the total potential drop is in the order of 50 mV. The pH in the local cell was measured using a commercial mono pH microelectrode coupled with a

  13. Microelectrode miRNA sensors enabled by enzymeless electrochemical signal amplification.

    Science.gov (United States)

    Wang, Tanyu; Viennois, Emilie; Merlin, Didier; Wang, Gangli

    2015-08-18

    Better detections of circulating microRNAs (miRNAs) as disease biomarkers could advance diseases diagnosis and treatment. Current analysis methods or sensors for research and applications are challenged by the low concentrations and wide dynamic range (from aM to nM) of miRNAs in a physiological sample. Here, we report a one-step label-free electrochemical sensor comprising a triple-stem DNA-redox probe structure on a gold microelectrode. A new signal amplification mechanism without the need of a redox enzyme is introduced. The novel strategy overcomes the fundamental limitations of microelectrode DNA sensors that fail to generate detectable current, which is primarily due to the limited amount of redox probes in response to the target analyte binding. By employing a reductant, tris(2-carboxyethyl) phosphine hydrochloride (TCEP) in the detection buffer solution, each redox molecule on the detection probe is cyclically oxidized at the electrode and reduced by the reductant; thus, the signal is amplified in situ during the detection period. The combined merits in the diagnosis power of cyclic voltammetry and the high sensitivity of pulse voltammetry enable parallel analysis for method validation and optimization previously inaccessible. As such, the detection limit of miRNA-122 was 0.1 fM via direct readout, with a wide detection range from sub fM to nM. The detection time is within minutes, which is a significant improvement over other macroscopic sensors and other relevant techniques such as quantitative reverse transcription polymerase chain reaction (qRT-PCR). The high selectivity of the developed sensors is demonstrated by the discrimination against two most similar family sequences: miR-122-3p present in serum and 2-mismatch synthetic RNA sequence. Interference such as nonspecific adsorption, a common concern in sensor development, is reduced to a negligible amount by adopting a multistep surface modification strategy. Importantly, unlike qRT-PCR, the

  14. Signal processing methods for reducing artifacts in microelectrode brain recordings caused by functional electrical stimulation

    Science.gov (United States)

    Young, D.; Willett, F.; Memberg, W. D.; Murphy, B.; Walter, B.; Sweet, J.; Miller, J.; Hochberg, L. R.; Kirsch, R. F.; Ajiboye, A. B.

    2018-04-01

    Objective. Functional electrical stimulation (FES) is a promising technology for restoring movement to paralyzed limbs. Intracortical brain-computer interfaces (iBCIs) have enabled intuitive control over virtual and robotic movements, and more recently over upper extremity FES neuroprostheses. However, electrical stimulation of muscles creates artifacts in intracortical microelectrode recordings that could degrade iBCI performance. Here, we investigate methods for reducing the cortically recorded artifacts that result from peripheral electrical stimulation. Approach. One participant in the BrainGate2 pilot clinical trial had two intracortical microelectrode arrays placed in the motor cortex, and thirty-six stimulating intramuscular electrodes placed in the muscles of the contralateral limb. We characterized intracortically recorded electrical artifacts during both intramuscular and surface stimulation. We compared the performance of three artifact reduction methods: blanking, common average reference (CAR) and linear regression reference (LRR), which creates channel-specific reference signals, composed of weighted sums of other channels. Main results. Electrical artifacts resulting from surface stimulation were 175  ×  larger than baseline neural recordings (which were 110 µV peak-to-peak), while intramuscular stimulation artifacts were only 4  ×  larger. The artifact waveforms were highly consistent across electrodes within each array. Application of LRR reduced artifact magnitudes to less than 10 µV and largely preserved the original neural feature values used for decoding. Unmitigated stimulation artifacts decreased iBCI decoding performance, but performance was almost completely recovered using LRR, which outperformed CAR and blanking and extracted useful neural information during stimulation artifact periods. Significance. The LRR method was effective at reducing electrical artifacts resulting from both intramuscular and surface FES, and

  15. Power Management of MEMS-Based Storage Devices for Mobile Systems

    NARCIS (Netherlands)

    Khatib, M.G.; Hartel, Pieter H.

    2008-01-01

    Because of its small form factor, high capacity, and expected low cost, MEMS-based storage is a suitable storage technology for mobile systems. MEMS-based storage devices should also be energy efficient for deployment in mobile systems. The problem is that MEMS-based storage devices are mechanical,

  16. Workload-Based Configuration of MEMS-Based Storage Devices for Mobile Systems

    NARCIS (Netherlands)

    Khatib, M.G.; Miller, E.L.; Hartel, Pieter H.

    2008-01-01

    Because of its small form factor, high capacity, and expected low cost, MEMS-based storage is a suitable storage technology for mobile systems. However, flash memory may outperform MEMS-based storage in terms of performance, and energy-efficiency. The problem is that MEMS-based storage devices have

  17. A Microchip-based Endothelium Mimic Utilizing Open Reservoirs for Cell Immobilization and Integrated Carbon Ink Microelectrodes for Detection

    Science.gov (United States)

    Hulvey, Matthew K; Martin, R. Scott

    2010-01-01

    This paper describes the fabrication and characterization of a microfluidic device that utilizes a reservoir-based approach for endothelial cell immobilization and integrated embedded carbon ink microelectrodes for the amperometric detection of extracellular nitric oxide (NO) release. The design utilizes a buffer channel to continuously introduce buffer or a plug of stimulant to the reservoir as well as a separate sampling channel that constantly withdraws buffer from the reservoir and over the microelectrode. A steel pin is used for both the fluidic connection to the sampling channel and to provide a quasi-reference electrode for the carbon ink microelectrode. Characterization of the device was performed using NO standards produced from a NONOate salt. Finally, NO release from a layer of immobilized endothelial cells was monitored and quantified using the system. This system holds promise as a means to electrochemically detect extracellular NO release from endothelial cells in either an array of reservoirs or concurrently with fluorescence-based intracellular NO measurements. PMID:18989663

  18. Influence of droplet coverage on the electrochemical response of planar microelectrodes and potential solving strategies based on nesting concept

    Directory of Open Access Journals (Sweden)

    Yue Yu

    2016-08-01

    Full Text Available Recently, biosensors have been widely used for the detection of bacteria, viruses and other toxins. Electrodes, as commonly used transducers, are a vital part of electrochemical biosensors. The coverage of the droplets can change significantly based on the hydrophobicity of the microelectrode surface materials. In the present research, screen-printed interdigitated microelectrodes (SPIMs, as one type of planar microelectrode, were applied to investigate the influence of droplet coverage on electrochemical response. Furthermore, three dimensional (3D printing technology was employed to print smart devices with different diameters based on the nesting concept. Theoretical explanations were proposed to elucidate the influence of the droplet coverage on the electrochemical response. 3D-printed ring devices were used to incubate the SPIMs and the analytical performances of the SPIMs were tested. According to the results obtained, our device successfully improved the stability of the signal responses and eliminated irregular signal changes to a large extent. Our proposed method based on the nesting concept provides a promising method for the fabrication of stable electrochemical biosensors. We also introduced two types of electrode bases to improve the signal stability.

  19. Spatial and temporal characteristics of V1 microstimulation during chronic implantation of a microelectrode array in a behaving macaque

    Science.gov (United States)

    Davis, T. S.; Parker, R. A.; House, P. A.; Bagley, E.; Wendelken, S.; Normann, R. A.; Greger, B.

    2012-12-01

    Objective. It has been hypothesized that a vision prosthesis capable of evoking useful visual percepts can be based upon electrically stimulating the primary visual cortex (V1) of a blind human subject via penetrating microelectrode arrays. As a continuation of earlier work, we examined several spatial and temporal characteristics of V1 microstimulation. Approach. An array of 100 penetrating microelectrodes was chronically implanted in V1 of a behaving macaque monkey. Microstimulation thresholds were measured using a two-alternative forced choice detection task. Relative locations of electrically-evoked percepts were measured using a memory saccade-to-target task. Main results. The principal finding was that two years after implantation we were able to evoke behavioural responses to electric stimulation across the spatial extent of the array using groups of contiguous electrodes. Consistent responses to stimulation were evoked at an average threshold current per electrode of 204 ± 49 µA (mean ± std) for groups of four electrodes and 91 ± 25 µA for groups of nine electrodes. Saccades to electrically-evoked percepts using groups of nine electrodes showed that the animal could discriminate spatially distinct percepts with groups having an average separation of 1.6 ± 0.3 mm (mean ± std) in cortex and 1.0° ± 0.2° in visual space. Significance. These results demonstrate chronic perceptual functionality and provide evidence for the feasibility of a cortically-based vision prosthesis for the blind using penetrating microelectrodes.

  20. The Polypyrrole/Multiwalled Carbon Nanotube Modified Au Microelectrode for Sensitive Electrochemical Detection of Trace Levels of Pb2+

    Directory of Open Access Journals (Sweden)

    Xuxing Zhu

    2017-03-01

    Full Text Available The sensitive detection of trace levels of heavy metal ions such as Pb2+ is of significant importance due to the health hazard they pose. In this paper, we present a polypyrrole (PPy/multiwalled carbon nanotube (MWCNT-modified Au microelectrode. The PPy/MWCNT composite film was electrochemically deposited on the microelectrode by cyclic voltammetry (CV. The composite film was investigated by scanning electron microscope (SEM, CV, and electrochemical impedance spectroscopy (EIS, and the results show that this film presents a uniformly distributed and web-like entangled structure and good conductivity. Differential pulse stripping voltammetry (DPSV was applied to determine trace levels of Pb2+. Experimental conditions including accumulation time and deposition potential were optimized. In optimal conditions, the PPy/MWCNT-modified microelectrode performed sensitive detection of Pb2+ within a concentration range from 1 to 100 μg·L−1, and the limit of detection was 0.65 μg·L−1 at the signal-to-noise ratio of three.

  1. Predicting fracture in micron-scale polycrystalline silicon MEMS structures.

    Energy Technology Data Exchange (ETDEWEB)

    Hazra, Siddharth S. (Carnegie Mellon University, Pittsburgh, PA); de Boer, Maarten Pieter (Carnegie Mellon University, Pittsburgh, PA); Boyce, Brad Lee; Ohlhausen, James Anthony; Foulk, James W., III; Reedy, Earl David, Jr.

    2010-09-01

    Designing reliable MEMS structures presents numerous challenges. Polycrystalline silicon fractures in a brittle manner with considerable variability in measured strength. Furthermore, it is not clear how to use a measured tensile strength distribution to predict the strength of a complex MEMS structure. To address such issues, two recently developed high throughput MEMS tensile test techniques have been used to measure strength distribution tails. The measured tensile strength distributions enable the definition of a threshold strength as well as an inferred maximum flaw size. The nature of strength-controlling flaws has been identified and sources of the observed variation in strength investigated. A double edge-notched specimen geometry was also tested to study the effect of a severe, micron-scale stress concentration on the measured strength distribution. Strength-based, Weibull-based, and fracture mechanics-based failure analyses were performed and compared with the experimental results.

  2. Optical measurement methods to study dynamic behavior in MEMS

    Science.gov (United States)

    Rembe, Christian; Kant, Rishi; Muller, Richard S.

    2001-10-01

    The maturing designs of moving microelectromechanical systems (MEMS) make it more-and-more important to have precise measurements and visual means to characterize dynamic microstructures. The Berkeley Sensor&Actuator Center (BSAC) has a forefront project aimed at developing these capabilities and at providing high-speed Internet (Supernet) access for remote use of its facilities. Already in operation are three optical-characterization tools: a stroboscopic-interferometer system, a computer-microvision system, and a laser-Doppler vibrometer. This paper describes precision and limitations of these systems and discusses their further development. In addition, we describe the results of experimental studies on the different MEMS devices, and give an overview about high-speed visualization of rapidly moving MEMS structures.

  3. MEMS capacitive force sensors for cellular and flight biomechanics

    International Nuclear Information System (INIS)

    Sun Yu; Nelson, Bradley J

    2007-01-01

    Microelectromechanical systems (MEMS) are playing increasingly important roles in facilitating biological studies. They are capable of providing not only qualitative but also quantitative information on the cellular, sub-cellular and organism levels, which is instrumental to understanding the fundamental elements of biological systems. MEMS force sensors with their high bandwidth and high sensitivity combined with their small size, in particular, have found a role in this domain, because of the importance of quantifying forces and their effect on the function and morphology of many biological structures. This paper describes our research in the development of MEMS capacitive force sensors that have already demonstrated their effectiveness in the areas of cell mechanics and Drosophila flight dynamics studies. (review article)

  4. MEMS and mil/aero: technology push and market pull

    Science.gov (United States)

    Clifford, Thomas H.

    2001-04-01

    MEMS offers attractive solutions to high-density fluidics, inertial, optical, switching and other demanding military/aerospace (mil/aero) challenges. However, full acceptance must confront the realities of production-scale producibility, verifiability, testability, survivability, as well as long-term reliability. Data on these `..ilities' are crucial, and are central in funding and deployment decisions. Similarly, mil/aero users must highlight specific missions, environmental exposures, and procurement issues, as well as the quirks of its designers. These issues are particularly challenging in MEMS, because of the laws of physics and business economics, as well as the risks of deploying leading-edge technology into no-fail applications. This paper highlights mil/aero requirements, and suggests reliability/qualification protocols, to guide development effort and to reassure mil/aero users that MEMS labs are mindful of the necessary realities.

  5. MEMS: A new approach to micro-optics

    Energy Technology Data Exchange (ETDEWEB)

    Sniegowski, J.J.

    1997-12-31

    MicroElectroMechanical Systems (MEMS) and their fabrication technologies provide great opportunities for application to micro-optical systems (MOEMS). Implementing MOEMS technology ranges from simple, passive components to complicated, active systems. Here, an overview of polysilicon surface micromachining MEMS combined with optics is presented. Recent advancements to the technology, which may enhance its appeal for micro-optics applications are emphasized. Of all the MEMS fabrication technologies, polysilicon surface micromachining technology has the greatest basis in and leverages the most the infrastructure for silicon integrated circuit fabrication. In that respect, it provides the potential for very large volume, inexpensive production of MOEMS. This paper highlights polysilicon surface micromachining technology in regards to its capability to provide both passive and active mechanical elements with quality optical elements.

  6. Integrated Magnetic MEMS Relays: Status of the Technology

    Directory of Open Access Journals (Sweden)

    Giuseppe Schiavone

    2014-08-01

    Full Text Available The development and application of magnetic technologies employing microfabricated magnetic structures for the production of switching components has generated enormous interest in the scientific and industrial communities over the last decade. Magnetic actuation offers many benefits when compared to other schemes for microelectromechanical systems (MEMS, including the generation of forces that have higher magnitude and longer range. Magnetic actuation can be achieved using different excitation sources, which create challenges related to the integration with other technologies, such as CMOS (Complementary Metal Oxide Semiconductor, and the requirement to reduce power consumption. Novel designs and technologies are therefore sought to enable the use of magnetic switching architectures in integrated MEMS devices, without incurring excessive energy consumption. This article reviews the status of magnetic MEMS technology and presents devices recently developed by various research groups, with key focuses on integrability and effective power management, in addition to the ability to integrate the technology with other microelectronic fabrication processes.

  7. Amplitude saturation of MEMS resonators explained by autoparametric resonance

    International Nuclear Information System (INIS)

    Van der Avoort, C; Bontemps, J J M; Steeneken, P G; Le Phan, K; Van Beek, J T M; Van der Hout, R; Hulshof, J; Fey, R H B

    2010-01-01

    This paper describes a phenomenon that limits the power handling of MEMS resonators. It is observed that above a certain driving level, the resonance amplitude becomes independent of the driving level. In contrast to previous studies of power handling of MEMS resonators, it is found that this amplitude saturation cannot be explained by nonlinear terms in the spring constant or electrostatic force. Instead we show that the amplitude in our experiments is limited by nonlinear terms in the equation of motion which couple the in-plane length-extensional resonance mode to one or more out-of-plane (OOP) bending modes. We present experimental evidence for the autoparametric excitation of these OOP modes using a vibrometer. The measurements are compared to a model that can be used to predict a power-handling limit for MEMS resonators

  8. Design, fabrication, and characterization of polymeric bioMEMS for the detection of feline immunodeficiency virus (FIV)

    Science.gov (United States)

    Cohen, Brian; Gadre, Anand; Kaloyeros, Alain E.

    2007-02-01

    This project comprises the development of a novel polymeric BioMEMS device capable of rapidly detecting FIV in a minimally invasive manner. FIV severely inhibits the infected feline from mounting an immune response, and causes susceptibility to other types of diseases. Vaccines against FIV do exist, but have some strong limitations to their effectiveness; so early detection is the best method to combat the spread of the disease. Current testing methods look for antibodies to the FIV protein p24 in feline blood using established Enzyme Linked ImmunoSorbent Assay (ELISA) protocols. The focus of this research is to design and construct a device that can detect antibodies to p24 in a salivary sample by non-intrusive electrochemical means. The device is constructed upon a silicon substrate with gold microelectrodes coated with polypyrrole (PPy), an electrically conducting and biocompatible polymer. In the current phase of the research, the PPy deposition process has been optimized with regards to film thickness, uniformity and conductivity. Microfluidic channels have been fabricated using SU-8, an epoxy based polymer that enables the test sample and other solutions to pass freely through the device. The PPy will be coated with anti-FIV p24 antibodies that can capture FIV p24 antigens present in a salivary sample. Future research will involve the analysis of PPy/antibody interaction and its effect on functionality. The capture of such antigens will interfere with a reduction-oxidation (redox) reaction in a subsequently added ionic solution. This interference will change the characteristic resistance of the solution yielding a qualitative test for the presence of the viral antigens in the sample and hence determining the occurrence of infection.

  9. Component-based assistants for MEMS design tools

    Science.gov (United States)

    Hahn, Kai; Brueck, Rainer; Schneider, Christian; Schumer, Christian; Popp, Jens

    2001-04-01

    With this paper a new approach for MEMS design tools will be introduced. An analysis of the design tool market leads to the result that most of the designers work with large and inflexible frameworks. Purchasing and maintaining these frameworks is expensive, and gives no optimum support for MEMS design process. The concept of design assistants, carried out with the concept of interacting software components, denotes a new generation of flexible, small, semi-autonomous software systems that are used to solve specific MEMS design tasks in close interaction with the designer. The degree of interaction depends on the complexity of the design task to be performed and the possibility to formalize the respective knowledge. In this context the Internet as one of today's most important communication media provides support for new tool concepts on the basis of the Java programming language. These modern technologies can be used to set up distributed and platform-independent applications. Thus the idea emerged to implement design assistants using Java. According to the MEMS design model new process sequences have to be defined new for every specific design object. As a consequence, assistants have to be built dynamically depending on the requirements of the design process, what can be achieved with component based software development. Componentware offers the possibility to realize design assistants, in areas like design rule checks, process consistency checks, technology definitions, graphical editors, etc. that may reside distributed over the Internet, communicating via Internet protocols. At the University of Siegen a directory for reusable MEMS components has been created, containing a process specification assistant and a layout verification assistant for lithography based MEMS technologies.

  10. Outcomes of Interventional-MRI Versus Microelectrode Recording-Guided Subthalamic Deep Brain Stimulation

    Directory of Open Access Journals (Sweden)

    Philip S. Lee

    2018-04-01

    Full Text Available In deep brain stimulation (DBS of the subthalamic nucleus (STN for Parkinson’s disease (PD, there is debate concerning the use of neuroimaging alone to confirm correct anatomic placement of the DBS lead into the STN, versus the use of microelectrode recording (MER to confirm functional placement. We performed a retrospective study of a contemporaneous cohort of 45 consecutive patients who underwent either interventional-MRI (iMRI or MER-guided DBS lead implantation. We compared radial lead error, motor and sensory side effect, and clinical benefit programming thresholds, and pre- and post-operative unified PD rating scale scores, and levodopa equivalent dosages. MER-guided surgery was associated with greater radial error compared to the intended target. In general, side effect thresholds during initial programming were slightly lower in the MER group, but clinical benefit thresholds were similar. No significant difference in the reduction of clinical symptoms or medication dosage was observed. In summary, iMRI lead implantation occurred with greater anatomic accuracy, in locations demonstrated to be the appropriate functional region of the STN, based on the observation of similar programming side effect and benefit thresholds obtained with MER. The production of equivalent clinical outcomes suggests that surgeon and patient preference can be used to guide the decision of whether to recommend iMRI or MER-guided DBS lead implantation to appropriate patients with PD.

  11. Alternative Post-Processing on a CMOS Chip to Fabricate a Planar Microelectrode Array

    Science.gov (United States)

    López-Huerta, Francisco; Herrera-May, Agustín L.; Estrada-López, Johan J.; Zuñiga-Islas, Carlos; Cervantes-Sanchez, Blanca; Soto, Enrique; Soto-Cruz, Blanca S.

    2011-01-01

    We present an alternative post-processing on a CMOS chip to release a planar microelectrode array (pMEA) integrated with its signal readout circuit, which can be used for monitoring the neuronal activity of vestibular ganglion neurons in newborn Wistar strain rats. This chip is fabricated through a 0.6 μm CMOS standard process and it has 12 pMEA through a 4 × 3 electrodes matrix. The alternative CMOS post-process includes the development of masks to protect the readout circuit and the power supply pads. A wet etching process eliminates the aluminum located on the surface of the p+-type silicon. This silicon is used as transducer for recording the neuronal activity and as interface between the readout circuit and neurons. The readout circuit is composed of an amplifier and tunable bandpass filter, which is placed on a 0.015 mm2 silicon area. The tunable bandpass filter has a bandwidth of 98 kHz and a common mode rejection ratio (CMRR) of 87 dB. These characteristics of the readout circuit are appropriate for neuronal recording applications. PMID:22346681

  12. A comparison of microelectrodes for a visual cortical prosthesis using finite element analysis

    Directory of Open Access Journals (Sweden)

    Emma Kate Brunton

    2012-09-01

    Full Text Available Altering the geometry of microelectrodes for use in a cortical neural prosthesis modifies the electric field generated in tissue, thereby affecting electrode efficacy and tissue damage. Commonly, electrodes with an active region located at the tip (conical electrodes are used for stimulation of cortex but there is argument to believe this geometry may not be the best. Here we use finite element analysis to compare the electric fields generated by three types of electrodes, a conical electrode with exposed active tip, an annular electrode with active area located up away from the tip, and a striped annular electrode where the active annular region has bands of insulation interrupting the full active region. The results indicate that current density on the surface of the conical electrodes can be up to ten times greater than current density on annular electrodes of the same height, which may increase the propensity for tissue damage. However choosing the most efficient electrode geometry in order to reduce power consumption is dependent on the distance of the electrode to the target neurons. If neurons are located within 10 micrometers of the electrode, then a small conical electrode would be more power efficient. On the other hand if the target neuron is greater than 500 micrometers away – as happens normally when insertion of an array of electrodes into cortex results in a kill zone around each electrode due to insertion damage and inflammatory responses - then a large annular electrode would be more efficient.

  13. ZnO crystal growth on microelectrode by electrochemical deposition method

    International Nuclear Information System (INIS)

    Kondo, Y; Ashida, A; Nouzu, N; Fujimura, N

    2011-01-01

    Zinc Oxide crystals were grown by constant potential electrochemical deposition method on the substrate with the Pt working electrode which consists of Pt film with large area and μm-sized line and space structured area. In case of depositions with cathodic potential of -0.3V, ZnO crystal is not observed on the micro electrode, but observed on the electrode with large area (0.2 cm 2 ). By using electrolyte with higher pH, ZnO crystal grows on both areas. In case of lower pH, ZnO crystal does not grow on either. From these results, the pH range for growth of ZnO on the microelectrode seems to be higher than that on the electrode with large area. And, it is expected that the pH just on the surface of μm-sized electrode is lower than that in the bulk of electrolyte. Based on these results, it can be concluded that control of the pH in vicinity of the surface is very important to ECD method for micro- and nano-scaled devices.

  14. Boron-doped nanocrystalline diamond microelectrode arrays monitor cardiac action potentials.

    Science.gov (United States)

    Maybeck, Vanessa; Edgington, Robert; Bongrain, Alexandre; Welch, Joseph O; Scorsone, Emanuel; Bergonzo, Philippe; Jackman, Richard B; Offenhäusser, Andreas

    2014-02-01

    The expansion of diamond-based electronics in the area of biological interfacing has not been as thoroughly explored as applications in electrochemical sensing. However, the biocompatibility of diamond, large safe electrochemical window, stability, and tunable electronic properties provide opportunities to develop new devices for interfacing with electrogenic cells. Here, the fabrication of microelectrode arrays (MEAs) with boron-doped nanocrystalline diamond (BNCD) electrodes and their interfacing with cardiomyocyte-like HL-1 cells to detect cardiac action potentials are presented. A nonreductive means of structuring doped and undoped diamond on the same substrate is shown. The resulting BNCD electrodes show high stability under mechanical stress generated by the cells. It is shown that by fabricating the entire surface of the MEA with NCD, in patterns of conductive doped, and isolating undoped regions, signal detection may be improved up to four-fold over BNCD electrodes passivated with traditional isolators. Copyright © 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

  15. Microelectrode array-induced neuronal alignment directs neurite outgrowth: analysis using a fast Fourier transform (FFT).

    Science.gov (United States)

    Radotić, Viktorija; Braeken, Dries; Kovačić, Damir

    2017-12-01

    Many studies have shown that the topography of the substrate on which neurons are cultured can promote neuronal adhesion and guide neurite outgrowth in the same direction as the underlying topography. To investigate this effect, isotropic substrate-complementary metal-oxide-semiconductor (CMOS) chips were used as one example of microelectrode arrays (MEAs) for directing neurite growth of spiral ganglion neurons. Neurons were isolated from 5 to 7-day-old rat pups, cultured 1 day in vitro (DIV) and 4 DIV, and then fixed with 4% paraformaldehyde. For analysis of neurite alignment and orientation, fast Fourier transformation (FFT) was used. Results revealed that on the micro-patterned surface of a CMOS chip, neurons orient their neurites along three directional axes at 30, 90, and 150° and that neurites aligned in straight lines between adjacent pillars and mostly followed a single direction while occasionally branching perpendicularly. We conclude that the CMOS substrate guides neurites towards electrodes by means of their structured pillar organization and can produce electrical stimulation of aligned neurons as well as monitoring their neural activities once neurites are in the vicinity of electrodes. These findings are of particular interest for neural tissue engineering with the ultimate goal of developing a new generation of MEA essential for improved electrical stimulation of auditory neurons.

  16. Recording nerve signals in canine sciatic nerves with a flexible penetrating microelectrode array

    Science.gov (United States)

    Byun, Donghak; Cho, Sung-Joon; Lee, Byeong Han; Min, Joongkee; Lee, Jong-Hyun; Kim, Sohee

    2017-08-01

    Objective. Previously, we presented the fabrication and characterization of a flexible penetrating microelectrode array (FPMA) as a neural interface device. In the present study, we aim to prove the feasibility of the developed FPMA as a chronic intrafascicular recording tool for peripheral applications. Approach. For recording from the peripheral nerves of medium-sized animals, the FPMA was integrated with an interconnection cable and other parts that were designed to fit canine sciatic nerves. The uniformity of tip exposure and in vitro electrochemical properties of the electrodes were characterized. The capability of the device to acquire in vivo electrophysiological signals was evaluated by implanting the FPMA assembly in canine sciatic nerves acutely as well as chronically for 4 weeks. We also examined the histology of implanted tissues to evaluate the damage caused by the device. Main results. Throughout recording sessions, we observed successful multi-channel recordings (up to 73% of viable electrode channels) of evoked afferent and spontaneous nerve unit spikes with high signal quality (SNR  >  4.9). Also, minor influences of the device implantation on the morphology of nerve tissues were found. Significance. The presented results demonstrate the viability of the developed FPMA device in the peripheral nerves of medium-sized animals, thereby bringing us a step closer to human applications. Furthermore, the obtained data provide a driving force toward a further study for device improvements to be used as a bidirectional neural interface in humans.

  17. Brain computer interface learning for systems based on electrocorticography and intracortical microelectrode arrays.

    Science.gov (United States)

    Hiremath, Shivayogi V; Chen, Weidong; Wang, Wei; Foldes, Stephen; Yang, Ying; Tyler-Kabara, Elizabeth C; Collinger, Jennifer L; Boninger, Michael L

    2015-01-01

    A brain-computer interface (BCI) system transforms neural activity into control signals for external devices in real time. A BCI user needs to learn to generate specific cortical activity patterns to control external devices effectively. We call this process BCI learning, and it often requires significant effort and time. Therefore, it is important to study this process and develop novel and efficient approaches to accelerate BCI learning. This article reviews major approaches that have been used for BCI learning, including computer-assisted learning, co-adaptive learning, operant conditioning, and sensory feedback. We focus on BCIs based on electrocorticography and intracortical microelectrode arrays for restoring motor function. This article also explores the possibility of brain modulation techniques in promoting BCI learning, such as electrical cortical stimulation, transcranial magnetic stimulation, and optogenetics. Furthermore, as proposed by recent BCI studies, we suggest that BCI learning is in many ways analogous to motor and cognitive skill learning, and therefore skill learning should be a useful metaphor to model BCI learning.

  18. Characterization of synchronized bursts in cultured hippocampal neuronal networks with learning training on microelectrode arrays.

    Science.gov (United States)

    Li, Yanling; Zhou, Wei; Li, Xiangning; Zeng, Shaoqun; Liu, Man; Luo, Qingming

    2007-06-15

    Spontaneous synchronized bursts seem to play a key role in brain functions such as learning and memory. Still controversial is the characterization of spontaneous synchronized bursts in neuronal networks after learning training, whether depression or promotion. By taking advantages of the main features of the microelectrode array (MEA) technology (i.e. multisite recordings, stable and long-term coupling with the biological preparation), we analyzed changes of spontaneous synchronized bursts in cultured hippocampal neuronal networks after learning training. And for this purpose, a learning model at networking level on MEA system was constructed, and analysis of spontaneous synchronized burst activity modulation was presented. Preliminary results show that, the number of burst was increased by 154%, burst duration was increased by 35%, and the number of spikes per burst was increased by 124%, while interburst interval decreased by 44% with learning. In particular, correlation and synchrony of neuronal activities in networks were enhanced by 51% and 36%, respectively, with learning. In contrast, dynamic properties of neuronal networks were not changed much when the network was under "non-learning" condition. These results indicate that firing, association and synchrony of spontaneous bursts in neuronal networks were promoted by learning. Furthermore, from these observations, we are encouraged to think of a more engineered system based on in vitro hippocampal neurons, as a novel sensitive system for electrophysiological evaluations.

  19. Brain Computer Interface Learning for Systems Based on Electrocorticography and Intracortical Microelectrode Arrays

    Directory of Open Access Journals (Sweden)

    Shivayogi V Hiremath

    2015-06-01

    Full Text Available A brain-computer interface (BCI system transforms neural activity into control signals for external devices in real time. A BCI user needs to learn to generate specific cortical activity patterns to control external devices effectively. We call this process BCI learning, and it often requires significant effort and time. Therefore, it is important to study this process and develop novel and efficient approaches to accelerate BCI learning. This article reviews major approaches that have been used for BCI learning, including computer-assisted learning, co-adaptive learning, operant conditioning, and sensory feedback. We focus on BCIs based on electrocorticography and intracortical microelectrode arrays for restoring motor function. This article also explores the possibility of brain modulation techniques in promoting BCI learning, such as electrical cortical stimulation, transcranial magnetic stimulation, and optogenetics. Furthermore, as proposed by recent BCI studies, we suggest that BCI learning is in many ways analogous to motor and cognitive skill learning, and therefore skill learning should be a useful metaphor to model BCI learning.

  20. Interdigitated microelectrode based impedance biosensor for detection of salmonella enteritidis in food samples

    Energy Technology Data Exchange (ETDEWEB)

    Kim, G [National Institute of Agricultural Engineering, 249 Seodun-dong, Suwon, Republic of Korea, 441-100 (Korea, Republic of); Morgan, M; Hahm, B K; Bhunia, A [Department of Food Science, Purdue University, West Lafayette, IN 47907 (United States); Mun, J H; Om, A S [Department of Food and Nutrient, Hanyang University, 17 Haengdang-dong, Seoul, Republic of Korea, 133-791 (Korea, Republic of)], E-mail: giyoungkim@rda.go.kr

    2008-03-15

    Salmonella enteritidis outbreaks continue to occur, and S. enteritidis-related outbreaks from various food sources have increased public awareness of this pathogen. Conventional methods for pathogens detection and identification are labor-intensive and take days to complete. Some immunological rapid assays are developed, but these assays still require prolonged enrichment steps. Recently developed biosensors have shown great potential for the rapid detection of foodborne pathogens. To develop the biosensor, an interdigitated microelectrode (IME) was fabricated by using semiconductor fabrication process. Anti-Salmonella antibodies were immobilized based on avidin-biotin binding on the surface of the IME to form an active sensing layer. To increase the sensitivity of the sensor, three types of sensors that have different electrode gap sizes (2 {mu}m, 5 {mu}m, 10 {mu}m) were fabricated and tested. The impedimetric biosensor could detect 10{sup 3} CFU/mL of Salmonella in pork meat extract with an incubation time of 5 minutes. This method may provide a simple, rapid and sensitive method to detect foodborne pathogens.