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Sample records for mems movable microelectrodes

  1. Movable MEMS Devices on Flexible Silicon

    KAUST Repository

    Ahmed, Sally

    2013-05-05

    Flexible electronics have gained great attention recently. Applications such as flexible displays, artificial skin and health monitoring devices are a few examples of this technology. Looking closely at the components of these devices, although MEMS actuators and sensors can play critical role to extend the application areas of flexible electronics, fabricating movable MEMS devices on flexible substrates is highly challenging. Therefore, this thesis reports a process for fabricating free standing and movable MEMS devices on flexible silicon substrates; MEMS flexure thermal actuators have been fabricated to illustrate the viability of the process. Flexure thermal actuators consist of two arms: a thin hot arm and a wide cold arm separated by a small air gap; the arms are anchored to the substrate from one end and connected to each other from the other end. The actuator design has been modified by adding etch holes in the anchors to suit the process of releasing a thin layer of silicon from the bulk silicon substrate. Selecting materials that are compatible with the release process was challenging. Moreover, difficulties were faced in the fabrication process development; for example, the structural layer of the devices was partially etched during silicon release although it was protected by aluminum oxide which is not attacked by the releasing gas . Furthermore, the thin arm of the thermal actuator was thinned during the fabrication process but optimizing the patterning and etching steps of the structural layer successfully solved this problem. Simulation was carried out to compare the performance of the original and the modified designs for the thermal actuators and to study stress and temperature distribution across a device. A fabricated thermal actuator with a 250 μm long hot arm and a 225 μm long cold arm separated by a 3 μm gap produced a deflection of 3 μm before silicon release, however, the fabrication process must be optimized to obtain fully functioning

  2. Movable MEMS Devices on Flexible Silicon

    KAUST Repository

    Ahmed, Sally

    2013-01-01

    Flexible electronics have gained great attention recently. Applications such as flexible displays, artificial skin and health monitoring devices are a few examples of this technology. Looking closely at the components of these devices, although MEMS

  3. Long-term neural recordings using MEMS based moveable microelectrodes in the brain

    Directory of Open Access Journals (Sweden)

    Nathan Jackson

    2010-06-01

    Full Text Available One of the critical requirements of the emerging class of neural prosthetic devices is to maintain good quality neural recordings over long time periods. We report here a novel (Micro-ElectroMechanical Systems based technology that can move microelectrodes in the event of deterioration in neural signal to sample a new set of neurons. Microscale electro-thermal actuators are used to controllably move microelectrodes post-implantation in steps of approximately 9 µm. In this study, a total of 12 moveable microelectrode chips were individually implanted in adult rats. Two of the 12 moveable microelectrode chips were not moved over a period of 3 weeks and were treated as control experiments. During the first three weeks of implantation, moving the microelectrodes led to an improvement in the average SNR from 14.61 ± 5.21 dB before movement to 18.13 ± 4.99 dB after movement across all microelectrodes and all days. However, the average RMS values of noise amplitudes were similar at 2.98 ± 1.22 µV and 3.01 ± 1.16 µV before and after microelectrode movement. Beyond three weeks, the primary observed failure mode was biological rejection of the PMMA (dental cement based skull mount resulting in the device loosening and eventually falling from the skull. Additionally, the average SNR for functioning devices beyond three weeks was 11.88 ± 2.02 dB before microelectrode movement and was significantly different (p<0.01 from the average SNR of 13.34 ± 0.919 dB after movement. The results of this study demonstrate that MEMS based technologies can move microelectrodes in rodent brains in long-term experiments resulting in improvements in signal quality. Further improvements in packaging and surgical techniques will potentially enable movable microelectrodes to record cortical neuronal activity in chronic experiments.

  4. Polycrystalline-Diamond MEMS Biosensors Including Neural Microelectrode-Arrays

    Directory of Open Access Journals (Sweden)

    Donna H. Wang

    2011-08-01

    Full Text Available Diamond is a material of interest due to its unique combination of properties, including its chemical inertness and biocompatibility. Polycrystalline diamond (poly-C has been used in experimental biosensors that utilize electrochemical methods and antigen-antibody binding for the detection of biological molecules. Boron-doped poly-C electrodes have been found to be very advantageous for electrochemical applications due to their large potential window, low background current and noise, and low detection limits (as low as 500 fM. The biocompatibility of poly-C is found to be comparable, or superior to, other materials commonly used for implants, such as titanium and 316 stainless steel. We have developed a diamond-based, neural microelectrode-array (MEA, due to the desirability of poly-C as a biosensor. These diamond probes have been used for in vivo electrical recording and in vitro electrochemical detection. Poly-C electrodes have been used for electrical recording of neural activity. In vitro studies indicate that the diamond probe can detect norepinephrine at a 5 nM level. We propose a combination of diamond micro-machining and surface functionalization for manufacturing diamond pathogen-microsensors.

  5. Design, simulation and fabrication of a novel contact-enhanced MEMS inertial switch with a movable contact point

    International Nuclear Information System (INIS)

    Cai Haogang; Ding Guifu; Yang Zhuoqing; Su Zhijuan; Zhou Jiansheng; Wang Hong

    2008-01-01

    A novel inertial switch based on a micro-electro-mechanical system (MEMS) was designed, which consists of three main parts: a proof mass as the movable electrode, a cross beam as the stationary electrode and a movable contact point to prolong the contact time. A MATLAB/Simulink model, which had been verified by comparison with ANSYS transient simulation, was built to simulate the dynamic response, based on which the contact-enhancing mechanism was confirmed and the dependence of threshold acceleration on the proof mass thickness was studied. The simulated dynamic responses under various accelerations exhibit satisfactory device behaviors: the switch-on time is prolonged under transient acceleration; the switch-on state is more continuous than the conventional design under long lasting acceleration. The inertial micro-switch was fabricated by multilayer electroplating technology and then tested by a drop hammer experiment. The test results indicate that the contact effect was improved significantly and a steady switch-on time of over 50 µs was observed under half-sine wave acceleration with 1 ms duration, in agreement with the dynamic simulation

  6. MEMS packaging

    CERN Document Server

    Hsu , Tai-Ran

    2004-01-01

    MEMS Packaging discusses the prevalent practices and enabling techniques in assembly, packaging and testing of microelectromechanical systems (MEMS). The entire spectrum of assembly, packaging and testing of MEMS and microsystems, from essential enabling technologies to applications in key industries of life sciences, telecommunications and aerospace engineering is covered. Other topics included are bonding and sealing of microcomponents, process flow of MEMS and microsystems packaging, automated microassembly, and testing and design for testing.The Institution of Engineering and Technology is

  7. Optical fibre angle sensor used in MEMS

    International Nuclear Information System (INIS)

    Golebiowski, J; Milcarz, Sz; Rybak, M

    2014-01-01

    There is a need for displacement and angle measurements in many movable MEMS structures. The use of fibre optical sensors helps to measure micrometre displacements and small rotation angles. Advantages of this type of transducers are their simple design, high precision of processing, low costs and ability of a non-contact measurement. The study shows an analysis of a fibre-optic intensity sensor used for MEMS movable structure rotation angle measurement. An intensity of the light in the photodetector is basically dependent on a distance between a reflecting surface and a head surface of the fibre transmitting arm, and the deflection angle. Experimental tests were made for PMMA 980/1000 plastic fibres, Θ NA =33°. The study shows both analytical and practical results. It proves that calculated and experimental characteristics for the analysed transducers are similar.

  8. Automatic control of movable detectors

    International Nuclear Information System (INIS)

    Wassel, W.W.; Remley, G.W.

    1980-01-01

    An invention is described, relating to a microprocessor based control system for a plurality of movable detectors, e.g. a nuclear reactor flux mapping system, with new system architecture which increases system availability by preventing faults on any of the detection channels from disabling the remaining channels. The system has, say, four drive trains for a number of detectors. Functional separation is realized by having two channels control their associated two drive trains. Redundancy is provided by having dual channels for operator interface. Communications between the functionally separate channels is accomplished by employing two-ported memories in conjunction with multiple microprocessors. (author)

  9. Movability or Autonomy for Humans

    KAUST Repository

    Schnapp, Jeffrey

    2018-01-18

    A human-centered approach to the design of smart robotic vehicles Contrary to the feverish promises of early 20th century futurists, the romance of the road has driven humanity down a dead end. The civilization of speed, acceleration, and motorized mobility has transformed the world into a perpetual traffic jam. Entire cities are being sacrificed on the altar of automobility. The landscape is being reduced to a flyover and drive-through zone, fissured by asphalt ribbons, fracked to extract fuels whose combustion is cooking the globe. Nearly 80% of urban areas are wrapped in dense blankets of smog. People arenメt moving more: they are moving less and with greater difficulty. And they are facing the health consequences of the sedentary life-styles they have been encouraged to adopt. If this is era of mobility, then I believe itメs time to shift gears: from mobility to movability. In this lecture, Jeffrey Schnapp will discuss how Movability unfolds on the far more intimate, intelligent, human-scale of the emerging 21st century cityscape. Itメs the scale of autonomous land drones threading their way down busy sidewalks; the scale of smart cargo carts invisibly coupled to workers making last mile deliveries in pedestrian-only zones; the scale of electric microcars platooning like trains while stopping off at individual destinations for pickups and dropoffs; and the scale of civic spaces animated by new kinds of vehicles that help the aging or the mobility-impaired to improve the quality of their lives and extend the range of their activities.

  10. Carbon microelectromechanical systems (C-MEMS) based microsupercapacitors

    KAUST Repository

    Agrawal, Richa

    2015-05-18

    The rapid development in miniaturized electronic devices has led to an ever increasing demand for high-performance rechargeable micropower scources. Microsupercapacitors in particular have gained much attention in recent years owing to their ability to provide high pulse power while maintaining long cycle lives. Carbon microelectromechanical systems (C-MEMS) is a powerful approach to fabricate high aspect ratio carbon microelectrode arrays, which has been proved to hold great promise as a platform for energy storage. C-MEMS is a versatile technique to create carbon structures by pyrolyzing a patterned photoresist. Furthermore, different active materials can be loaded onto these microelectrode platforms for further enhancement of the electrochemical performance of the C-MEMS platform. In this article, different techniques and methods in order to enhance C-MEMS based various electrochemical capacitor systems have been discussed, including electrochemical activation of C-MEMS structures for miniaturized supercapacitor applications, integration of carbon nanostructures like carbon nanotubes onto C-MEMS structures and also integration of pseudocapacitive materials such as polypyrrole onto C-MEMS structures. © (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.

  11. Carbon microelectromechanical systems (C-MEMS) based microsupercapacitors

    KAUST Repository

    Agrawal, Richa; Beidaghi, Majid; Chen, Wei; Wang, Chunlei

    2015-01-01

    The rapid development in miniaturized electronic devices has led to an ever increasing demand for high-performance rechargeable micropower scources. Microsupercapacitors in particular have gained much attention in recent years owing to their ability to provide high pulse power while maintaining long cycle lives. Carbon microelectromechanical systems (C-MEMS) is a powerful approach to fabricate high aspect ratio carbon microelectrode arrays, which has been proved to hold great promise as a platform for energy storage. C-MEMS is a versatile technique to create carbon structures by pyrolyzing a patterned photoresist. Furthermore, different active materials can be loaded onto these microelectrode platforms for further enhancement of the electrochemical performance of the C-MEMS platform. In this article, different techniques and methods in order to enhance C-MEMS based various electrochemical capacitor systems have been discussed, including electrochemical activation of C-MEMS structures for miniaturized supercapacitor applications, integration of carbon nanostructures like carbon nanotubes onto C-MEMS structures and also integration of pseudocapacitive materials such as polypyrrole onto C-MEMS structures. © (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.

  12. Biofunctionalization of diamond microelectrodes

    Energy Technology Data Exchange (ETDEWEB)

    Reitinger, Andreas Adam; Lud, Simon Quartus; Stutzmann, Martin; Garrido, Jose Antonio [Walter Schottky Institut, TU Muenchen (Germany); Hutter, Naima Aurelia; Richter, Gerhard; Jordan, Rainer [WACKER-Chair of Macromolecular Chemistry, TU Muenchen (Germany)

    2010-07-01

    In this work we present two main routes for the biofunctionalization of nanocrystalline diamond films, aiming at the application of diamond microelectrodes as amperometric biosensors. We report on direct covalent grafting of biomolecules on nanocrystalline diamond films via diazonium monophenyls and biphenyls as well as other linker molecules, forming self-assembled monolayers on the diamond surface. Monolayers with different functional head groups have been characterized. Patterning of the available functional groups using electron beam-induced chemical lithography allows the selective preparation of well-localized docking sites for the immobilization of biomolecules. Furthermore, polymer brushes are expected to enable novel paths for designing more advanced biosensing schemes, incorporating multifunctional groups and a higher loading capacity for biomolecules. Here, we focus on the preparation of polymer grafts by self-initiated photografting and photopolymerization. Further chemical modification of the grafted polymer brushes results in the introduction of additional functional molecules, paving the way for the incorporation of more complex molecular structures such as proteins. In a comparative study we investigate the advantages and disadvantages of both approaches.

  13. RF MEMS

    Indian Academy of Sciences (India)

    At the bare die level the insertion loss, return loss and the isolation ... ing and packaging of a silicon on glass based RF MEMS switch fabricated using DRIE. ..... follows the power law based on the asperity deformation model given by Pattona & ... Surface mount style RF packages (SMX series 580465) from Startedge Corp.

  14. Positron annihilation imaging device having movable collimator

    International Nuclear Information System (INIS)

    Thompson, C.J.

    1981-01-01

    This patent application relates to a positron annihilation imaging device comprising two circular arrays of detectors disposed in spaced apart parallel planes and circumferentially offset by half the detector spacing, axially movable annular outer collimator rings, generally disposed in a pair of opposite planes outside the associated planes of the detectors, each collimator being movable toward the opposite collimator. An inner collimator of annular configuration is disposed between the two rows of detectors and is formed in two rings which may be separated axially. The outer and inner collimators serve to enhance data readout and imaging. (author)

  15. Movable collimator for positron annihilation imaging device

    International Nuclear Information System (INIS)

    Thompson, C.J.

    1981-01-01

    A positron annihilation imaging device having two circular arrays of detectors disposed in spaced apart parallel planes wherein axially movable annular collimator rings are generally disposed in a pair of opposite planes outside the associated planes of the collimators to each collimator being movable toward the opposite collimator and a central collimator of annular configuration generally disposed between the two rows of detectors but being split into two rings which may be separated, the outer and inner collimators serving to enhance data readout and imaging

  16. Lead salt resonant cavity enhanced detector with MEMS mirror

    Science.gov (United States)

    Felder, F.; Fill, M.; Rahim, M.; Zogg, H.; Quack, N.; Blunier, S.; Dual, J.

    2010-01-01

    We describe a tunable resonant cavity enhanced detector (RCED) for the mid-infrared employing narrow gap lead-chalcogenide (IV-VI) layers on a Si substrate. The device consists of an epitaxial Bragg reflector layer, a thin p-n+ heterojunction with PbSrTe as detecting layer and a micro-electro-mechanical system (MEMS) micromirror as second mirror. Despite the thin absorber layer the sensitivity is even higher than for a conventional detector. Tunability is achieved by changing the cavity length with a vertically movable MEMS mirror. The device may be used as miniature infrared spectrometer to cover the spectral range from 30 μm.

  17. New movable plate for efficient millimeter wave vertical on-chip antenna

    KAUST Repository

    Marnat, Loic; Carreno, Armando Arpys Arevalo; Conchouso Gonzalez, David; Galicia Martinez, Miguel Angel; Foulds, Ian G.; Shamim, Atif

    2013-01-01

    A new movable plate concept is presented in this paper to realize mm-wave vertical on-chip antennas through MEMS based post-processing steps in a CMOS compatible process. By virtue of its vertical position, the antenna is isolated from the lossy Si substrate and hence performs with a better efficiency as compared to the horizontal position. In addition, the movable plate concept enables polarization diversity by providing both horizontal and vertical polarizations on the same chip. Through a first iteration fractal bowtie antenna design, dual band (60 and 77 GHz) operation is demonstrated in both horizontal and vertical positions without any change in dimensions or use of switches for two different mediums (Si and air). To support the movable plate concept, the transmission line and antenna are designed on a flexible polyamide, where the former has been optimized to operate in the bent position. The design is highly suitable for compact, low cost and efficient SoC solutions. © 1963-2012 IEEE.

  18. New movable plate for efficient millimeter wave vertical on-chip antenna

    KAUST Repository

    Marnat, Loic

    2013-04-01

    A new movable plate concept is presented in this paper to realize mm-wave vertical on-chip antennas through MEMS based post-processing steps in a CMOS compatible process. By virtue of its vertical position, the antenna is isolated from the lossy Si substrate and hence performs with a better efficiency as compared to the horizontal position. In addition, the movable plate concept enables polarization diversity by providing both horizontal and vertical polarizations on the same chip. Through a first iteration fractal bowtie antenna design, dual band (60 and 77 GHz) operation is demonstrated in both horizontal and vertical positions without any change in dimensions or use of switches for two different mediums (Si and air). To support the movable plate concept, the transmission line and antenna are designed on a flexible polyamide, where the former has been optimized to operate in the bent position. The design is highly suitable for compact, low cost and efficient SoC solutions. © 1963-2012 IEEE.

  19. 49 CFR 236.766 - Locking, movable bridge.

    Science.gov (United States)

    2010-10-01

    ... 49 Transportation 4 2010-10-01 2010-10-01 false Locking, movable bridge. 236.766 Section 236.766... Locking, movable bridge. The rail locks, bridge locks, bolt locks, circuit controllers, and electric locks used in providing interlocking protection at a movable bridge. ...

  20. Soldering of Nanotubes onto Microelectrodes

    DEFF Research Database (Denmark)

    Madsen, Dorte Nørgaard; Mølhave, Kristian; Mateiu, Ramona Valentina

    2003-01-01

    Suspended bridges of individual multiwalled carbon nanotubes were fabricated inside a scanning electron microscope by soldering the nanotube onto microelectrodes with highly conducting gold-carbon material. By the decomposition of organometallic vapor with the electron beam, metal-containing sold...... bonds were consistently found to be mechanically stronger than the carbon nanotubes.......Suspended bridges of individual multiwalled carbon nanotubes were fabricated inside a scanning electron microscope by soldering the nanotube onto microelectrodes with highly conducting gold-carbon material. By the decomposition of organometallic vapor with the electron beam, metal-containing solder...... bonds were formed at the intersection of the nanotube and the electrodes. Current-voltage curves indicated metallic conduction of the nanotubes, with resistances in the range of 9-29 kOmega. Bridges made entirely of the soldering material exhibited resistances on the order of 100 Omega, and the solder...

  1. Conducting polymer 3D microelectrodes

    DEFF Research Database (Denmark)

    Sasso, Luigi; Vazquez, Patricia; Vedarethinam, Indumathi

    2010-01-01

    Conducting polymer 3D microelectrodes have been fabricated for possible future neurological applications. A combination of micro-fabrication techniques and chemical polymerization methods has been used to create pillar electrodes in polyaniline and polypyrrole. The thin polymer films obtained...... showed uniformity and good adhesion to both horizontal and vertical surfaces. Electrodes in combination with metal/conducting polymer materials have been characterized by cyclic voltammetry and the presence of the conducting polymer film has shown to increase the electrochemical activity when compared...

  2. Hollow MEMS

    DEFF Research Database (Denmark)

    Larsen, Peter Emil

    Miniaturization of electro mechanical sensor systems to the micro range and beyond has shown impressive sensitivities measuring sample properties like mass, viscosity, acceleration, pressure and force just to name a few applications. In order to enable these kinds of measurements on liquid samples...... a hollow MEMS sensor has been designed, fabricated and tested. Combined density, viscosity, buoyant mass spectrometry and IR absorption spectroscopy are possible on liquid samples and micron sized suspended particles (e.g. single cells). Measurements are based on changes in the resonant behavior...... of these sensors. Optimization of the microfabrication process has led to a process yield of almost 100% .This is achieved despite the fact, that the process still offers a high degree of flexibility. By simple modifications the Sensor shape can be optimized for different size ranges and sensitivities...

  3. Pyrolytic 3D Carbon Microelectrodes for Electrochemistry

    DEFF Research Database (Denmark)

    Hemanth, Suhith; Caviglia, Claudia; Amato, Letizia

    2016-01-01

    This work presents the fabrication and characterization of suspended three-dimensional (3D) pyrolytic carbon microelectrodes for electrochemical applications. For this purpose, an optimized process with multiple steps of UV photolithography with the negative tone photoresist SU-8 followed...... by pyrolysis at 900ºC for 1h was developed. With this process, microelectrode chips with a three electrode configuration were fabricated and characterized with cyclic voltammetry (CV) using a 10mM potassium ferri-ferrocyanide redox probe in a custom made batch system with magnetic clamping. The 3D pyrolytic...... carbon microelectrodes displayed twice the higher peak current compared to 2D....

  4. Biomaterials for MEMS

    CERN Document Server

    Chiao, Mu

    2011-01-01

    This book serves as a guide for practicing engineers, researchers, and students interested in MEMS devices that use biomaterials and biomedical applications. It is also suitable for engineers and researchers interested in MEMS and its applications but who do not have the necessary background in biomaterials.Biomaterials for MEMS highlights important features and issues of biomaterials that have been used in MEMS and biomedical areas. Hence this book is an essential guide for MEMS engineers or researchers who are trained in engineering institutes that do not provide the background or knowledge

  5. Conducting Polymer 3D Microelectrodes

    Directory of Open Access Journals (Sweden)

    Jenny Emnéus

    2010-12-01

    Full Text Available Conducting polymer 3D microelectrodes have been fabricated for possible future neurological applications. A combination of micro-fabrication techniques and chemical polymerization methods has been used to create pillar electrodes in polyaniline and polypyrrole. The thin polymer films obtained showed uniformity and good adhesion to both horizontal and vertical surfaces. Electrodes in combination with metal/conducting polymer materials have been characterized by cyclic voltammetry and the presence of the conducting polymer film has shown to increase the electrochemical activity when compared with electrodes coated with only metal. An electrochemical characterization of gold/polypyrrole electrodes showed exceptional electrochemical behavior and activity. PC12 cells were finally cultured on the investigated materials as a preliminary biocompatibility assessment. These results show that the described electrodes are possibly suitable for future in-vitro neurological measurements.

  6. Management of excessive movable tissue: a modified impression technique.

    Science.gov (United States)

    Shum, Michael H C; Pow, Edmond H N

    2014-08-01

    Excessive movable tissue is a challenge in complete denture prosthetics. A modified impression technique is presented with polyvinyl siloxane impression material and a custom tray with relief areas and perforations in the area of the excessive movable tissue. Copyright © 2014 Editorial Council for the Journal of Prosthetic Dentistry. Published by Elsevier Inc. All rights reserved.

  7. 23 CFR 650.809 - Movable span bridges.

    Science.gov (United States)

    2010-04-01

    ... 23 Highways 1 2010-04-01 2010-04-01 false Movable span bridges. 650.809 Section 650.809 Highways FEDERAL HIGHWAY ADMINISTRATION, DEPARTMENT OF TRANSPORTATION ENGINEERING AND TRAFFIC OPERATIONS BRIDGES, STRUCTURES, AND HYDRAULICS Navigational Clearances for Bridges § 650.809 Movable span bridges. A fixed bridge...

  8. Band-type microelectrodes for amperometric immunoassays

    Energy Technology Data Exchange (ETDEWEB)

    Lee, Ga-Yeon; Chang, Young Wook; Ko, Hyuk [Department of Materials Science and Engineering, Yonsei University, 134 Shinchon-dong, Seodaemun-gu, Seoul, 120-749 (Korea, Republic of); Kang, Min-Jung [Korea Institute of Science and Technology (KIST), Seoul (Korea, Republic of); Pyun, Jae-Chul, E-mail: jcpyun@yonsei.ac.kr [Department of Materials Science and Engineering, Yonsei University, 134 Shinchon-dong, Seodaemun-gu, Seoul, 120-749 (Korea, Republic of)

    2016-07-20

    A band-type microelectrode was made using a parylene-N film as a passivation layer. A circular-type, mm-scale electrode with the same diameter as the band-type microelectrode was also made with an electrode area that was 5000 times larger than the band-type microelectrode. By comparing the amperometric signals of 3,5,3′,5′-tetramethylbenzidine (TMB) samples at different optical density (OD) values, the band-type microelectrode was determined to be 9 times more sensitive than the circular-type electrode. The properties of the circular-type and the band-type electrodes (e.g., the shape of their cyclic voltammograms, the type of diffusion layer used, and the diffusion layer thickness per unit electrode area) were characterized according to their electrode area using the COMSOL Multiphysics software. From these simulations, the band-type electrode was estimated to have the conventional microelectrode properties, even when the electrode area was 100 times larger than a conventional circular-type electrode. These results show that both the geometry and the area of an electrode can influence the properties of the electrode. Finally, amperometric analysis based on a band-type electrode was applied to commercial ELISA kits to analyze human hepatitis B surface antigen (hHBsAg) and human immunodeficiency virus (HIV) antibodies. - Highlights: • A band-type microelectrode was made using a parylene-N film as a passivation layer. • The band-type microelectrode was 14-times more sensitive than circular-type electrode. • The influence of geometry on microelectrode properties was simulated using COMSOL. • The band-type electrode was applied to ELISA kits for hHBsAg and hHIV-antibodies.

  9. Failure Mechanisms of a Gold Microelectrode in Bioelectronics Applications

    Directory of Open Access Journals (Sweden)

    Jonghun Kim

    2015-01-01

    Full Text Available The generation, growth, and collapse of tiny bubbles are inevitable for a microelectrode working in aqueous environment, thus resulting in physical damages on the microelectrode. The failure mechanisms of a microelectrode induced by tiny bubble collapsing are investigated by generating tiny hydrogen bubbles on a gold microelectrode through deionized water electrolysis. The surface of the microelectrode is modified with a thiol-functionalized arginine-glycine-aspartic acid peptide to generate perfectly spherical bubbles in proximity of the surface. The failure of an Au microelectrode is governed by two damage mechanisms, depending on the thickness of the microelectrode: a water-hammer pressure due to the violent collapse of a single large bubble, formed through merging of small bubbles, for ultrathin Au microelectrodes of 40–60 nm in thickness, and an energy accumulation resulting from the repetitive collapse of tiny bubbles for thick Au microelectrodes of 100–120 nm.

  10. Modularly Integrated MEMS Technology

    National Research Council Canada - National Science Library

    Eyoum, Marie-Angie N

    2006-01-01

    Process design, development and integration to fabricate reliable MEMS devices on top of VLSI-CMOS electronics without damaging the underlying circuitry have been investigated throughout this dissertation...

  11. Movable air solar collector and its efficiency

    International Nuclear Information System (INIS)

    Lauva, A.; Aboltinš, A.; Palabinskis, J.; Karpova Sadigova, N.

    2008-01-01

    Implementing the guidelines of the Latvian National Programme for Energy in the field of alternative energy, intensive research shall be carried on regarding the use of solar energy, as it can be successfully used not only for the purposes of water heating and production of electrical energy, but also for air warming. The amount of heat necessary for the drying of rough forage and grain drying by active aeration in June, July and August can be obtained using solar radiation. The Latvian Guidelines for the Energy Development 2006-2016 state that the solar radiance in Latvia is of quite low intensity. The total amount of solar energy is 1109 kWh m -2 per year. The period of usage of the solar thermal energy is beginning from the last decade of April, when the intensity of radiation is 120 kWh m -2 , until the first decade of September. Within this period (approximately 1800 hours), it is possible to use the solar thermal energy by placing solar collectors. The usage of solar collectors for in drying of agricultural production is topical from the viewpoint of decreasing the consumption of energy used for the drying, as electrical energy and fossil energy resources become more expensive and tend to run out. In the processes that concern drying of agricultural production, efficiently enough solar radiation energy can be used. Due to this reason researching continues and expands in the field of usage of solar energy for the processes of drying and heating. The efficiency factor of the existing solar collectors is not high, but they are of simple design and cheep for production and exploitation. By improving the design of the solar collectors and choosing modern materials that absorb the solar radiation energy, it is possible the decrease the efficiency factor of solar collectors and decrease the production costs. In the scientific laboratory of grain drying and storage of Latvia University of Agriculture, a pilot device movable folding solar collector pilot device

  12. TFTR movable limiter instrumentation and controls

    International Nuclear Information System (INIS)

    Frankenberg, J.; Collins, D.; Kaufmann, D.; Mamoun, A.

    1983-01-01

    The TFTR movable limiter is a single poloidal limiter located within one 18 /SUP o/ segment of the vacuum vessel. It consists of three (3) interconnected inconel backing plates covered with titanium carbide coated graphite tiles. The backing plates are positioned by three independent screw drive actuators. Cooling water is fed through the horizontal port cover to tubes brazed onto the backs of the backing plates. Thermocouples monitor the limiter temperature. (1) and more fully described in refs. (1) and (2). The positioning actuators are driven by independently controlled DC servo motors, controlled either locally or from CICADA. Drive motor shaft position is monitored by chain driven encoders and potentiometers. Limiter blade position can be varied to suit any plasma within the operating range. CICADA is programmed to keep the limiter stroke within safe operating limits. A microprocessor duplicates the CICADA protective function allowing limiter operation without CICADA. The potentiometer signal is sent to an analog computer, which safeguards the limiter against failure of the encoders or the micro-processor. Cooling water flows through the limiter in 3 separate paths, one for each blade. The flow rate and temperature rise through each loop are measured accurately to allow CICADA to calculate the heat into each blade. The water system is also interlocked and alarmed to prevent dumping of water into the vacuum vessel

  13. Capacitive MEMS-based sensors : thermo-mechanical stability and charge trapping

    OpenAIRE

    van Essen, M.C.

    2009-01-01

    Micro-Electro Mechanical Systems (MEMS) are generally characterized as miniaturized systems with electrostatically driven moving parts. In many cases, the electrodes are capacitively coupled. This basic scheme allows for a plethora of specifications and functionality. This technology has presently matured and is widely employed in industry. A voltage across the electrodes will attract the movable part. This relation between electric field and separation (or capacitance) can be conveniently em...

  14. Integrated design of MEMS

    DEFF Research Database (Denmark)

    De Grave, Arnaud; Brissaud, Daniel

    2007-01-01

    Emerging technologies of Micro-Electromechanical Systems (MEMS) are applications such as airbag accelerometers. Micro-products present many physical differences from macro-products. Moreover, there is a high level of integration in multiple fields of physics with strongly coupled effects...... industrial immersion to propose a socio-technological description of the design process and MEMS design tools....

  15. Batch fabrication of nanotubes suspended between microelectrodes

    DEFF Research Database (Denmark)

    Mateiu, Ramona Valentina; Stöckli, T.; Knapp, H. F.

    2007-01-01

    be done with a simple lift-off process with standard photolithographic resist. An applied electric field is sustained between the microelectrodes during CVD to guide the nanotube growth. Comparison with simulations shows that the location and the orientation of the grown carbon nanotubes (CNT) correspond...... to the regions of maximum electric field, enabling accurate positioning of a nanotube by controlling the shape of the microelectrodes. The CNT bridges are deflected tens of nm when a DC voltage is applied between the nanotube and a gate microelectrode indicating that the clamping through the catalyst particles...... is not only mechanically stable but also electrical conducting. This method could be used to fabricate nanoelectromechanical systems based on suspended double clamped CNTs depending only on photolithography and standard Cleanroom processes....

  16. Analysis of movable bus stop boarding and alighting areas.

    Science.gov (United States)

    2013-05-01

    This study explored the feasibility of using movable and reusable boarding and alighting (B&A) pads at bus stops. : Potential design alternatives in terms of materials and structural support for these pads were evaluated. The review : focused on the ...

  17. a Movable Charging Unit for Green Mobility

    Science.gov (United States)

    ElBanhawy, E. Y.; Nassar, K.

    2013-05-01

    Battery swapping of electric vehicles (EVs) matter appears to be the swiftest and most convenient to users. The existence of swapping stations increases the feasibility of distributed energy storage via the electric grid. However, it is a cost-prohibitive way of charging. Early adaptors' preferences of /perceptions about EV system in general, has its inflectional effects on potential users hence the market penetration level. Yet, the charging matter of electric batteries worries the users and puts more pressure on them with the more rigorous planning-ahead they have to make prior to any trip. This paper presents a distinctive way of charging. It aims at making the overall charging process at ease. From a closer look into the literature, most of EVs' populations depend on domestic charge. Domestic charging gives them more confidence and increases the usability factor of the EV system. Nevertheless, they still need to count on the publically available charging points to reach their destination(s). And when it comes to multifamily residences, it becomes a thorny problem as these apartments do not have a room for charging outlets. Having said the irritating charging time needed to fatten the batteries over the day and the minimal average mileage drove daily, hypothetically, home delivery charging (Movable Charging Unit-MCU) would be a stupendous solution. The paper discusses the integration of shortest path algorithm problem with the information about EV users within a metropolitan area, developing an optimal route for a charging unit. This MCU delivers charging till homes whether by swapping batteries or by fast charging facility. Information about users is to be provided by the service provider of the neighbourhood, which includes charging patterns (timing, power capacity). This problem lies under the shortest path algorithms problem. It provides optimal route of charging that in return shall add more reliability and usability values and alleviate the charging

  18. Design of the movable limiters for JT-60

    International Nuclear Information System (INIS)

    Takashima, Tetsuo; Yamamoto, Masahiro; Nakamura, Hiroo; Ohkubo, Minoru; Ohta, Mitsuru

    1976-07-01

    Two fast-acting movable rail limiters will be used in JT-60 to suppress skin effect of the plasma current with a large radius. They travel safely through a stroke of about 1 m for 0.1 sec in the build-up phase of plasma current. The movable limiter system consists of a driving mechanism, a vacuum seal, a bearing used at high temperatures in a vacuum, a molybdenum rail limiter weighing 200 kg and its auxiliary members. Many problems are involved in construction of the system because the design specifications exceed the present technology. Described are design of the movable limiter system for JT-60 and problems in the mechanical, electrical and vacuum aspects. (auth.)

  19. Concept Design of Movable Beam of Hydraulic Press

    Directory of Open Access Journals (Sweden)

    Li Yancong

    2017-01-01

    Full Text Available The hydraulic press movable beam is one of the key components of the hydraulic press; its design quality impacts the accuracy of the workpiece that the press suppressed. In this paper, first, with maximum deflection and material strength as constraints, mechanical model of the movable beam is established; next, the concept design model of the moveable beam structure is established; the relationship among the force of the side cylinder, the thickness of the inclined plate, outer plate is established also. Taking movable beam of the 100MN type THP10-10000 isothermal forging hydraulic press as an example, the conceptual design result is given. This concept design method mentoned in the paper has general meaning and can apply to other similar product design.

  20. High Efficiency Optical MEMS by the Integration of Photonic Lattices with Surface MEMS

    Energy Technology Data Exchange (ETDEWEB)

    FLEMING, JAMES G.; LIN, SHAWN-YU; MANI, SEETHAMBAL S.; RODGERS, M. STEVEN; DAGEL, DARYL J.

    2002-11-01

    This report outlines our work on the integration of high efficiency photonic lattice structures with MEMS (MicroElectroMechanical Systems). The simplest of these structures were based on 1-D mirror structures. These were integrated into a variety of devices, movable mirrors, switchable cavities and finally into Bragg fiber structures which enable the control of light in at least 2 dimensions. Of these devices, the most complex were the Bragg fibers. Bragg fibers consist of hollow tubes in which light is guided in a low index media (air) and confined by surrounding Bragg mirror stacks. In this work, structures with internal diameters from 5 to 30 microns have been fabricated and much larger structures should also be possible. We have demonstrated the fabrication of these structures with short wavelength band edges ranging from 400 to 1600nm. There may be potential applications for such structures in the fields of integrated optics and BioMEMS. We have also looked at the possibility of waveguiding in 3 dimensions by integrating defects into 3-dimensional photonic lattice structures. Eventually it may be possible to tune such structures by mechanically modulating the defects.

  1. The design and application of the movable limiter in EAST

    Energy Technology Data Exchange (ETDEWEB)

    Lei Cao, E-mail: caolei@ipp.ac.cn [Institute of Plasma Physics, Chinese Academy of Science, Shushanhu road 350, Hefei 230031 (China); Song Yuntao [Institute of Plasma Physics, Chinese Academy of Science, Shushanhu road 350, Hefei 230031 (China)

    2011-10-15

    There are two movable limiters that have been installed on EAST. The movable limiter consists of three parts that are blade, support components and drive components. The blade which consists of heat sink and graphite tiles has to face plasma during plasma discharge. The support components consist of a long shaft and a movable plate. The drive components consists of a screw shaft, a step motor, four guide shafts and two support plates. There is an extra support which has fit in Tokamak and a frame on the outside of the flange. The specific shape of the blade has been optimized so that the graphite tiles on the blade can withstand max 5 MW/m{sup 2} heat load with two long cooling channels. The long shaft of the transfer components connect with blade to make it can move along the axis of the limiter. The movable blade could adjust a wide variety of plasma major and minor diameters. The drive components provide motion from step motor which can be remote controlled in the control room far away from the scene. The rotation is translated to slide motion by a screw shaft. The screw shaft can push the slide which connected with the long shaft to at last move the blade. To introduce the motion from outside to the vacuum vessel, the limiter has a long bellow and special structure as dynamical seal. This seal structure proved very reliable. The remote control system has been also equipped the distance sensor to provide the information of the position of the limiter. The control system is based on PC so it can be easily operated. The two movable limiters have been installed on the EAST. During past twice discharges, the movable limiter proved to be a useful tool for EAST to control the plasma boundary.

  2. The design and application of the movable limiter in EAST

    International Nuclear Information System (INIS)

    Lei Cao; Song Yuntao

    2011-01-01

    There are two movable limiters that have been installed on EAST. The movable limiter consists of three parts that are blade, support components and drive components. The blade which consists of heat sink and graphite tiles has to face plasma during plasma discharge. The support components consist of a long shaft and a movable plate. The drive components consists of a screw shaft, a step motor, four guide shafts and two support plates. There is an extra support which has fit in Tokamak and a frame on the outside of the flange. The specific shape of the blade has been optimized so that the graphite tiles on the blade can withstand max 5 MW/m 2 heat load with two long cooling channels. The long shaft of the transfer components connect with blade to make it can move along the axis of the limiter. The movable blade could adjust a wide variety of plasma major and minor diameters. The drive components provide motion from step motor which can be remote controlled in the control room far away from the scene. The rotation is translated to slide motion by a screw shaft. The screw shaft can push the slide which connected with the long shaft to at last move the blade. To introduce the motion from outside to the vacuum vessel, the limiter has a long bellow and special structure as dynamical seal. This seal structure proved very reliable. The remote control system has been also equipped the distance sensor to provide the information of the position of the limiter. The control system is based on PC so it can be easily operated. The two movable limiters have been installed on the EAST. During past twice discharges, the movable limiter proved to be a useful tool for EAST to control the plasma boundary.

  3. Advanced Mechatronics and MEMS Devices

    CERN Document Server

    2013-01-01

    Advanced Mechatronics and MEMS Devicesdescribes state-of-the-art MEMS devices and introduces the latest technology in electrical and mechanical microsystems. The evolution of design in microfabrication, as well as emerging issues in nanomaterials, micromachining, micromanufacturing and microassembly are all discussed at length in this volume. Advanced Mechatronics also provides a reader with knowledge of MEMS sensors array, MEMS multidimensional accelerometer, artificial skin with imbedded tactile components, as well as other topics in MEMS sensors and transducers. The book also presents a number of topics in advanced robotics and an abundance of applications of MEMS in robotics, like reconfigurable modular snake robots, magnetic MEMS robots for drug delivery and flying robots with adjustable wings, to name a few. This book also: Covers the fundamentals of advanced mechatronics and MEMS devices while also presenting new state-of-the-art methodology and technology used in the application of these devices Prese...

  4. Vertically aligned carbon nanotubes for microelectrode arrays applications.

    Science.gov (United States)

    Castro Smirnov, J R; Jover, Eric; Amade, Roger; Gabriel, Gemma; Villa, Rosa; Bertran, Enric

    2012-09-01

    In this work a methodology to fabricate carbon nanotube based electrodes using plasma enhanced chemical vapour deposition has been explored and defined. The final integrated microelectrode based devices should present specific properties that make them suitable for microelectrode arrays applications. The methodology studied has been focused on the preparation of highly regular and dense vertically aligned carbon nanotube (VACNT) mat compatible with the standard lithography used for microelectrode arrays technology.

  5. The link between Movability Number and Incipient Motion in river ...

    African Journals Online (AJOL)

    This allowed for a firmer definition of Incipient Motion as well as a new bedload transportation equation. Additional laboratory experimentation for Particle Reynolds number over the range 0.12-486 facilitated the improved prediction of Incipient Motion from a plot of the critical Movability Number vs. Particle Reynolds number ...

  6. Piezoelectric MEMS resonators

    CERN Document Server

    Piazza, Gianluca

    2017-01-01

    This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associate...

  7. Going Fabless with MEMS

    Directory of Open Access Journals (Sweden)

    Bhaskar CHOUBEY

    2011-04-01

    Full Text Available The Microelectromechanical sensors are finding increasing applications in everyday life. However, each MEMS sensor is generally fabricated on its own individual process. This leads to high cost per sensor. It has been suggested the MEMS should and would follow the path of integrated circuits industry, wherein fabless firms could concentrate on design leading pure-foundries to perfect the manufacturing process. With several designs being manufactured on the same process, the installation cost of fabrication would be evenly shared. Simultaneously, multiple project wafer runs are being offered for MEMS processes to encourage design activity in universities as well as startups. This paper reviews the present state of this transition through an experience of designing and manufacturing microelectromechanical resonators on different processes.

  8. MEMS fluidic actuator

    Science.gov (United States)

    Kholwadwala, Deepesh K [Albuquerque, NM; Johnston, Gabriel A [Trophy Club, TX; Rohrer, Brandon R [Albuquerque, NM; Galambos, Paul C [Albuquerque, NM; Okandan, Murat [Albuquerque, NM

    2007-07-24

    The present invention comprises a novel, lightweight, massively parallel device comprising microelectromechanical (MEMS) fluidic actuators, to reconfigure the profile, of a surface. Each microfluidic actuator comprises an independent bladder that can act as both a sensor and an actuator. A MEMS sensor, and a MEMS valve within each microfluidic actuator, operate cooperatively to monitor the fluid within each bladder, and regulate the flow of the fluid entering and exiting each bladder. When adjacently spaced in a array, microfluidic actuators can create arbitrary surface profiles in response to a change in the operating environment of the surface. In an embodiment of the invention, the profile of an airfoil is controlled by independent extension and contraction of a plurality of actuators, that operate to displace a compliant cover.

  9. EDITORIAL: International MEMS Conference 2006

    Science.gov (United States)

    Tay, Francis E. H.; Jianmin, Miao; Iliescu, Ciprian

    2006-04-01

    The International MEMS conference (iMEMS2006) organized by the Institute of Bioengineering and Nanotechnology and Nanyang Technological University aims to provide a platform for academicians, professionals and industrialists in various related fields from all over the world to share and learn from each other. Of great interest is the incorporation of the theme of life sciences application using MEMS. It is the desire of this conference to initiate collaboration and form network of cooperation. This has continued to be the objective of iMEMS since its inception in 1997. The technological advance of MEMS over the past few decades has been truly exciting in terms of development and applications. In order to participate in this rapid development, a conference involving delegates from within the MEMS community and outside the community is very meaningful and timely. With the receipt of over 200 articles, delegates related to MEMS field from all over the world will share their perspectives on topics such as MEMS/MST Design, MEMS Teaching and Education, MEMS/MST Packaging, MEMS/MST Fabrication, Microsystems Applications, System Integration, Wearable Devices, MEMSWear and BioMEMS. Invited speakers and delegates from outside the field have also been involved to provide challenges, especially in the life sciences field, for the MEMS community to potentially address. The proceedings of the conference will be published as an issue in the online Journal of Physics: Conference Series and this can reach a wider audience and will facilitate the reference and citation of the work presented in the conference. We wish to express our deep gratitude to the International Scientific Committee members and the organizing committee members for contributing to the success of this conference. We would like to thank all the delegates, speakers and sponsors from all over the world for presenting and sharing their perspectives on topics related to MEMS and the challenges that MEMS can

  10. Design and characteristics of the drive mechanism for movable limiters of JT-60, (1)

    International Nuclear Information System (INIS)

    Takashima, Tetsuo; Morishita, Osamu; Yamamoto, Masahiro; Shimizu, Masatsugu; Ohta, Mitsuru

    1976-10-01

    Two fast-acting movable rail limiters will be installed in a large Tokamak JT-60 being designed in JAERI. The movable limiter consists of a drive mechanism, a vacuum seal, a bearing, and a molybdenum rail limiter. Design of the drive mechanism for the movable limiter and experimental results on the driving characteristics in full scale are described. (auth.)

  11. MEMS and the microbe

    NARCIS (Netherlands)

    Ingham, C.J.; Vlieg, J.E.T.V.H.

    2008-01-01

    In recent years, relatively simple MEMS fabrications have helped accelerate our knowledge of the microbial cell. Current progress and challenges in the application of lab-on-a-chip devices to the viable microbe are reviewed. Furthermore, the degree to which microbiologists are becoming the engineers

  12. Microelectromechanical Systems (MEMS)

    Indian Academy of Sciences (India)

    As a field, Microelectromechanical Systems (MEMS) has matured over the last two decades to have several scientific journals dedicated to it. These journals are instrumental in bringing out the interdisciplinary nature of research that the field demands. In the beginning, most papers were process centric where realization of ...

  13. Microelectromechanical Systems (MEMS)

    Indian Academy of Sciences (India)

    to have several scientific journals dedicated to it. These journals are instrumental in bringing out the interdisciplinary nature of research that the field demands. In the beginning, most papers were process centric where realization of a MEMS device or structure using conven- tional CMOS processes or their variants was the ...

  14. MEMS Solar Generators

    OpenAIRE

    Grbovic, Dragoslav; Osswald, Sebastian

    2011-01-01

    Approved for public release; distribution is unlimited Using MEMS bimaterial structures to build highly efficient solar energy generators. This is a novel approach that utilizes developments in the area of bimaterial sensors and applies them in the field of solar energy harvesting.

  15. Fabrication of three-dimensional carbon microelectrodes for electrochemical sensing

    DEFF Research Database (Denmark)

    Hemanth, Suhith

    Carbon microelectrodes have a wide range of applications because of their unique material properties and biocompatibility. The aim of the research work carried out in this thesis was to develop three-dimensional (3D) carbon microelectrodes for electrochemical applications. Three different fabrica...

  16. Electric potential microelectrode for studies of electrobiogeophysics

    DEFF Research Database (Denmark)

    Damgaard, Lars Riis; Risgaard-Petersen, Nils; Nielsen, Lars Peter

    2014-01-01

    were needle-shaped, shielded Ag/AgCl half-cells that were rendered insensitive to redox-active species in the environment. Tip diameters of 40 to 100 μm and signal resolution of approximately 10 μV were achieved. A test in marine sediments with active cable bacteria showed an electric potential......Spatially separated electron donors and acceptors in sediment can be exploited by the so-called “cable bacteria.” Electric potential microelectrodes (EPMs) were constructed to measure the electric fields that should appear when cable bacteria conduct electrons over centimeter distances. The EPMs...

  17. European MEMS foundries

    Science.gov (United States)

    Salomon, Patric R.

    2003-01-01

    According to the latest release of the NEXUS market study, the market for MEMS or Microsystems Technology (MST) is predicted to grow to $68B by the year 2005, with systems containing these components generating even higher revenues and growth. The latest advances in MST/MEMS technology have enabled the design of a new generation of microsystems that are smaller, cheaper, more reliable, and consume less power. These integrated systems bring together numerous analog/mixed signal microelectronics blocks and MEMS functions on a single chip or on two or more chips assembled within an integrated package. In spite of all these advances in technology and manufacturing, a system manufacturer either faces a substantial up-front R&D investment to create his own infrastructure and expertise, or he can use design and foundry services to get the initial product into the marketplace fast and with an affordable investment. Once he has a viable product, he can still think about his own manufacturing efforts and investments to obtain an optimized high volume manufacturing for the specific product. One of the barriers to successful exploitation of MEMS/MST technology has been the lack of access to industrial foundries capable of producing certified microsystems devices in commercial quantities, including packaging and test. This paper discusses Multi-project wafer (MPW) runs, requirements for foundries and gives some examples of foundry business models. Furthermore, this paper will give an overview on MST/MEMS services that are available in Europe, including pure commercial activities, European project activities (e.g. Europractice), and some academic services.

  18. Screening metal nanoparticles using boron-doped diamond microelectrodes

    Energy Technology Data Exchange (ETDEWEB)

    Ivandini, Tribidasari A., E-mail: ivandini.tri@sci.ui.ac.id; Rangkuti, Prasmita K. [Department of Chemistry, FMIPA, Universitas Indonesia, Kampus UI Depok (Indonesia); Einaga, Yasuaki [Department of Chemistry, Faculty of Science and Technology, Keio University (Japan); JST ACCEL, 3-14-1 Hiyoshi, Yokohama 223-8522 (Japan)

    2016-04-19

    Boron-doped diamond (BDD) microelectrodes were used to observe the correlation between electrocatalytic currents caused by individual Pt nanoparticle (Pt-np) collisions at the electrode. The BDD microelectrodes, ∼20 µm diameter and ∼2 µm particle size, were fabricated at the surface of tungsten wires. Pt-np with a size of 1 to 5 nm with agglomerations up to 20 nm was used for observation. The electrolytic currents were observed via catalytic reaction of 15 mM hydrazine in 50 mM phosphate buffer solution at Pt-np at 0.4 V when it collides with the surface of the microelectrodes. The low current noise and wider potential window in the measurements using BDD microelectrode produced a better results, which represents a better correlation to the TEM result of the Pt-np, compared to when gold microelectrodes was used.

  19. Screening metal nanoparticles using boron-doped diamond microelectrodes

    International Nuclear Information System (INIS)

    Ivandini, Tribidasari A.; Rangkuti, Prasmita K.; Einaga, Yasuaki

    2016-01-01

    Boron-doped diamond (BDD) microelectrodes were used to observe the correlation between electrocatalytic currents caused by individual Pt nanoparticle (Pt-np) collisions at the electrode. The BDD microelectrodes, ∼20 µm diameter and ∼2 µm particle size, were fabricated at the surface of tungsten wires. Pt-np with a size of 1 to 5 nm with agglomerations up to 20 nm was used for observation. The electrolytic currents were observed via catalytic reaction of 15 mM hydrazine in 50 mM phosphate buffer solution at Pt-np at 0.4 V when it collides with the surface of the microelectrodes. The low current noise and wider potential window in the measurements using BDD microelectrode produced a better results, which represents a better correlation to the TEM result of the Pt-np, compared to when gold microelectrodes was used.

  20. Entangling movable mirrors in a double cavity system

    DEFF Research Database (Denmark)

    Pinard, Michel; Dantan, Aurelien Romain; Vitali, David

    2005-01-01

    We propose a double-cavity set-up capable of generating a stationary entangled state of two movable mirrors at cryogenic temperatures. The scheme is based on the optimal transfer of squeezing of input optical fields to mechanical vibrational modes of the mirrors, realized by the radiation pressure...... of the intracavity light. We show that the presence of macroscopic entanglement can be demonstrated by an appropriate readout of the output light of the two cavities....

  1. Rotor for processing liquids using movable capillary tubes

    Science.gov (United States)

    Johnson, W.F.; Burtis, C.A.; Walker, W.A.

    1987-07-17

    A rotor assembly for processing liquids, especially whole blood samples, is disclosed. The assembly includes apparatus for separating non-liquid components of whole blood samples from liquid components, apparatus for diluting the separated liquid component with a diluent and apparatus for transferring the diluted sample to an external apparatus for analysis. The rotor assembly employs several movable capillary tubes to handle the sample and diluents. A method for using the rotor assembly to process liquids is also described. 5 figs.

  2. Nanostructured gold microelectrodes for extracellular recording

    Energy Technology Data Exchange (ETDEWEB)

    Brueggemann, Dorothea; Wolfrum, Bernhard; Maybeck, Vanessa; Offenhaeusser, Andreas [CNI Center of Nanoelectronic Systems for Information Technology and Institute of Bio- and Nanosystems 2, Forschungszentrum Juelich (Germany)

    2010-07-01

    Electrophysiological activity of electrogenic cells is currently recorded with planar bioelectronic interfaces such as microelectrode arrays (MEAs). In this work, a novel concept of biocompatible nanostructured gold MEAs for extracellular signal recording is presented. MEAs were fabricated using clean room technologies, e.g. photolithography and metallization. Subsequently, they were modified with gold nanopillars of approximately 300 to 400 nm in height and 60 nm width. The nanostructuring process was carried out with a template-assisted approach using nanoporous aluminium oxide. Impedance spectroscopy of the resulting nanostructures showed higher capacitances compared to planar gold. This confirmed the expected increase of the surface area via nanostructuring. We used the nanostructured microelectrodes to record extracellular potentials from heart muscle cells (HL1), which were plated onto the chips. Good coupling between the HL1 cells and the nanostructured electrodes was observed. The resulting signal-to-noise ratio of nanopillar-MEAs was increased by a factor of 2 compared to planar MEAs. In future applications this nanopillar concept can be adopted for distinct interface materials and coupling to cellular and molecular sensing components.

  3. Estimation of neural energy in microelectrode signals

    Science.gov (United States)

    Gaumond, R. P.; Clement, R.; Silva, R.; Sander, D.

    2004-09-01

    We considered the problem of determining the neural contribution to the signal recorded by an intracortical electrode. We developed a linear least-squares approach to determine the energy fraction of a signal attributable to an arbitrary number of autocorrelation-defined signals buried in noise. Application of the method requires estimation of autocorrelation functions Rap(tgr) characterizing the action potential (AP) waveforms and Rn(tgr) characterizing background noise. This method was applied to the analysis of chronically implanted microelectrode signals from motor cortex of rat. We found that neural (AP) energy consisted of a large-signal component which grows linearly with the number of threshold-detected neural events and a small-signal component unrelated to the count of threshold-detected AP signals. The addition of pseudorandom noise to electrode signals demonstrated the algorithm's effectiveness for a wide range of noise-to-signal energy ratios (0.08 to 39). We suggest, therefore, that the method could be of use in providing a measure of neural response in situations where clearly identified spike waveforms cannot be isolated, or in providing an additional 'background' measure of microelectrode neural activity to supplement the traditional AP spike count.

  4. Research on the Effects of the Movable Die and its Counter Force on Sheet Hydroforming

    International Nuclear Information System (INIS)

    Zhou, Li X.; Zhang, Shi H.; Wang, Ben X.

    2007-01-01

    An improved Sheet Hydro-forming process was proposed, which was investigated in Institute of Metal Research, Chinese Academy of Sciences. ASAME system and FEM are used to analyze the forming process to explain some results that were found in the experiment. In the simulation, the effect of the movable die on the maximum principal stress is investigated in detail by using the FEM code LS-DYNA. For this case, the movable die changes the distribution of the maximum principal stress. For the sheet hydroforming without the movable die, the principal stress near the shoulder of the movable die arrives to the maximum value when t=0.0033s suddenly. But for the sheet hydroforming with the movable die, the maximum principal stress still lies in the die radius. The principal stress near the shoulder of the movable die is smaller. At the last stage contacting with the die, for the case without the movable die, the maximum principal stress near the shoulder of movable die is larger than that of the sheet hydroforming with the movable die. Moreover, the stress distribution near the shoulder of movable die for the case without the movable die is complicated. It is instable and very easy to occur wrinkling. The movable die delays the maximum thickness strain to the contacting die stage. So the formability of sheet metal can be remarkably improved by adopting the movable die. On a certain extent, the uniform distribution of thickness can be realized by increasing the counterforce of movable die. The minimum thickness reduction moves outside which is very helpful for the uniform thickness distribution. In this paper, two kinds of materials, soft steel and stainless steel, were investigated

  5. Converting MEMS technology into profits

    Science.gov (United States)

    Bryzek, Janusz

    1998-08-01

    This paper discusses issues related to transitioning a company from the advanced technology development phase (with a particular focus on MEMS) to a profitable business, with emphasis on start-up companies. It includes several case studies from (primarily) NovaSensor MEMS development history. These case studies illustrate strategic problems with which advanced MEMS technology developers have to be concerned. Conclusions from these case studies could be used as checkpoints for future MEMS developers to increase probability of profitable operations. The objective for this paper is to share the author's experience from multiple MEMS start-ups to accelerate development of the MEMS market by focusing state- of-the-art technologists on marketing issues.

  6. “GEOHeritage” - GIS Based Application for Movable Heritage

    Directory of Open Access Journals (Sweden)

    Albina Moscicka

    2011-12-01

    Full Text Available The paper will present the results of a research project „A methodology for mapping movable heritage”.  This project, financed by the Polish Ministry of Science and Higher Education in 2008-2010, was realized by the Institute of Geodesy and Cartography in cooperation with the Research and Academic Computer Network (portal Polska.pl, the Central Archives of Historical Records and Department of Art History of the Wroclaw University. The idea of the project was to simplify access to digital movable cultural heritage by the use of spatial information. The main aspect of the project was to use a Geographic Information System (GIS - as a technology and as a tool - to integrate different digital collections, present their content in one space and provide online access to them from one common level – from an online map. The essence of the research was to present on the online map movable monument as multi-spatial object. The base of this assumption is that most of monuments, especially movable ones, can have several places in the geographical space that are connected with them (several various space relations. As a rule archival documents were created in one place, describe the other, today can be kept in places far away from the place they were prepared, and what more the parts of the same collection can be kept in different archives. Moreover, one single document can be connected or have relations (typological, thematically, temporal, spatial with other relations to the same or the other one. The reason for it is that documents concerning various places are housed in the same archive, various documents can present the same place or the place of creating particular document can be the place of housing another. In the project the basic source material was digital collections of original records. Their metadata defined in the international standards of monuments’ description were used for connecting digital monuments with the geographic space

  7. From MEMS to nanomachine

    International Nuclear Information System (INIS)

    Esashi, Masayoshi; Ono, Takahito

    2005-01-01

    Practically applicable microelectromechanical systems (MEMS) and nanomachines have been developed by applying dry processes. Deep reactive ion etching (RIE) of silicon and its applications to an electrostatically levitated rotational gyroscope, a fibre optic blood pressure sensor and in micro-actuated probes are described. High density electrical feedthrough in glass is made using deep RIE of glass and electroplating of metal. Multi-probe data storage system has been developed using the high density electrical feedthrough in glass. Chemical vapour deposition (CVD) of different materials have been developed for MEMS applications; trench-refill using SiO 2 CVD, microstructures using Silicon carbide CVD for glass mold press and selective CVD of carbon nanotube for electron field emitter. Multi-column electron beam lithography system has been developed using the electron field emitter. (topical review)

  8. A novel combinational pH-PCO2 microelectrode.

    Science.gov (United States)

    Rao, X; Ma, Y

    1993-07-01

    A novel combinational pH-PCO2 microelectrode based on a neutral carrier hydrogen ion exchanger is described. It is easy to fabricate and allows pH and PCO2 to be measured simultaneously. The microelectrode has a 5-microns tip. The PCO2 microelectrode exhibits a linear response in the range 1.75 x 10(-5)-10(-2) mol/liter with a Nernstian slope of 57.0 mV/decade at 25 degrees C. The detection limit is 10(-5) mol/liter. The pH microelectrode exhibits a linear response in the range pH 4-12 with a Nernstian slope of 60.0 mV/decade at 25 degrees C. The 95% steady-state response time of the PCO2 microelectrode is about 2 min, while it is about 10 s for pH microelectrode. The electromotive force drift is 4.3 mV/h (PCO2) and 2.6 mV/h (pH), respectively. The lifetime is 3 to 4 days. The microelectrode can measure pH and PCO2 in body fluids simultaneously with satisfactory results. It is also a good basic electrode for enzyme microelectrolysis.

  9. Apparatus and method of inserting a microelectrode in body tissue or the like using vibration means

    Science.gov (United States)

    Feldstein, C.; Crawford, D. W.; Kanabus, E. W. (Inventor)

    1979-01-01

    An arrangement for and method of inserting a glass microelectrode having a tip in the micron range into body tissue is presented. The arrangement includes a microelectrode. The top of the microelectrode is attached to the diaphragm center of a first speaker. The microelectrode tip is brought into contact with the tissue by controlling a micromanipulator. Thereafter, an audio signal is applied to the speaker to cause the microelectrode to vibrate and thereby pierce the tissue surface without breaking the microelectrode tip. Thereafter, the tip is inserted into the tissue to the desired depth by operating the micromanipulator with the microelectrode in a vibratory or non-vibratory state.

  10. Pyrolytic 3D Carbon Microelectrodes for Electrochemistry

    DEFF Research Database (Denmark)

    Hemanth, Suhith; Caviglia, Claudia; Amato, Letizia

    2016-01-01

    electrochemical activity, chemical stability, and ease in surface functionalization [1]. The most common carbon microfabrication techniques (i.e. screen printing) produce two-dimensional (2D) electrodes, which limit the detection sensitivity. Hence several 3D microfabrication techniques have been explored......This work presents the fabrication and characterization of multi-layered three-dimensional (3D) pyrolysed carbon microelectrodes for electrochemical applications. For this purpose, an optimized UV photolithography and pyrolysis process with the negative tone photoresist SU-8 has been developed...... carbon [2]. This process enables fabrication of 2D and 3D electrodes with possibility for tailoring ad-hoc designs and unique sensitivities for specific applications. Due to this, pyrolysed carbon is becoming increasingly attractive for numerous applications, such as novel sensors and scaffolds for cell...

  11. A novel technique for die-level post-processing of released optical MEMS

    International Nuclear Information System (INIS)

    Elsayed, Mohannad Y; Beaulieu, Philippe-Olivier; Briere, Jonathan; Ménard, Michaël; Nabki, Frederic

    2016-01-01

    This work presents a novel die-level post-processing technique for dies including released movable structures. The procedure was applied to microelectromechanical systems (MEMS) chips that were fabricated in a commercial process, SOIMUMPs from MEMSCAP. It allows the performance of a clean DRIE etch of sidewalls on the diced chips enabling the optical testing of the pre-released MEMS mirrors through the chip edges. The etched patterns are defined by photolithography using photoresist spray coating. The photoresist thickness is tuned to create photoresist bridges over the pre-released gaps, protecting the released structures during subsequent wet processing steps. Then, the chips are subject to a sequence of wet and dry etching steps prior to dry photoresist removal in O 2 plasma. Processed micromirrors were tested and found to rotate similarly to devices without processing, demonstrating that the post-processing procedure does not affect the mechanical performance of the devices significantly. (technical note)

  12. Carbon fiber on polyimide ultra-microelectrodes

    Science.gov (United States)

    Gillis, Winthrop F.; Lissandrello, Charles A.; Shen, Jun; Pearre, Ben W.; Mertiri, Alket; Deku, Felix; Cogan, Stuart; Holinski, Bradley J.; Chew, Daniel J.; White, Alice E.; Otchy, Timothy M.; Gardner, Timothy J.

    2018-02-01

    Objective. Most preparations for making neural recordings degrade over time and eventually fail due to insertion trauma and reactive tissue response. The magnitudes of these responses are thought to be related to the electrode size (specifically, the cross-sectional area), the relative stiffness of the electrode, and the degree of tissue tolerance for the material. Flexible carbon fiber ultra-microelectrodes have a much smaller cross-section than traditional electrodes and low tissue reactivity, and thus may enable improved longevity of neural recordings in the central and peripheral nervous systems. Only two carbon fiber array designs have been described previously, each with limited channel densities due to limitations of the fabrication processes or interconnect strategies. Here, we describe a method for assembling carbon fiber electrodes on a flexible polyimide substrate that is expected to facilitate the construction of high-density recording and stimulating arrays. Approach. Individual carbon fibers were aligned using an alignment tool that was 3D-printed with sub-micron resolution using direct laser writing. Indium deposition on the carbon fibers, followed by low-temperature microsoldering, provided a robust and reliable method of electrical connection to the polyimide interconnect. Main results. Spontaneous multiunit activity and stimulation-evoked compound responses with SNR  >10 and  >120, respectively, were recorded from a small (125 µm) peripheral nerve. We also improved the typically poor charge injection capacity of small diameter carbon fibers by electrodepositing 100 nm-thick iridium oxide films, making the carbon fiber arrays usable for electrical stimulation as well as recording. Significance. Our innovations in fabrication technique pave the way for further miniaturization of carbon fiber ultra-microelectrode arrays. We believe these advances to be key steps to enable a shift from labor intensive, manual assembly to a more automated

  13. Topology optimized RF MEMS switches

    DEFF Research Database (Denmark)

    Philippine, M. A.; Zareie, H.; Sigmund, Ole

    2013-01-01

    Topology optimization is a rigorous and powerful method that should become a standard MEMS design tool - it can produce unique and non-intuitive designs that meet complex objectives and can dramatically improve the performance and reliability of MEMS devices. We present successful uses of topology...

  14. Electromagnetic actuation in MEMS switches

    DEFF Research Database (Denmark)

    Oliveira Hansen, Roana Melina de; Mátéfi-Tempfli, Mária; Chemnitz, Steffen

    . Electromagnetic actuation is a very promising approach to operate such MEMS and Power MEMS devices, due to the long range, reproducible and strong forces generated by this method, among other advantages. However, the use of electromagnetic actuation in such devices requires the use of thick magnetic films, which...

  15. Fatigue Design and Prevention in Movable Scaffolding Systems

    Directory of Open Access Journals (Sweden)

    Coelho Hugo

    2017-06-01

    Full Text Available The Movable Scaffolding System (MSS is a heavy construction equipment used for casting situ of concrete bridge decks. In the past decades, MSSs have become increasingly complex and industrialized, enlarging its span ranges, incorporating auxiliary elevation machinery and increasing productivity. The tendency nowadays is for strong reutilization and the notion of MSS as a disposable or temporary structure is somehow reductive. The main structure of MSSs may be potentially exposed to fatigue, usually characterized by low number of cycles with significant stress amplitude. Fatigue may be prevented through adequate design; judicious selection of materials; demanding quality control and implementation of robust inspection and maintenance plans.

  16. Fatigue Design and Prevention in Movable Scaffolding Systems

    Science.gov (United States)

    Coelho, Hugo; Torres, Alberto; Pacheco, Pedro; Moreira, Cristiano; Silva, Rute; Soares, José M.; Pinto, Dânia

    2017-06-01

    The Movable Scaffolding System (MSS) is a heavy construction equipment used for casting situ of concrete bridge decks. In the past decades, MSSs have become increasingly complex and industrialized, enlarging its span ranges, incorporating auxiliary elevation machinery and increasing productivity. The tendency nowadays is for strong reutilization and the notion of MSS as a disposable or temporary structure is somehow reductive. The main structure of MSSs may be potentially exposed to fatigue, usually characterized by low number of cycles with significant stress amplitude. Fatigue may be prevented through adequate design; judicious selection of materials; demanding quality control and implementation of robust inspection and maintenance plans.

  17. Design of movable fixed area γ dose rate monitor

    International Nuclear Information System (INIS)

    Li Dongyu; Cheng Wen; Li Jikai; Huang Hong; Shen Qiming; Zhang Qiang; Liu Zhengshan

    2005-10-01

    Movable fixed area γ dose rate monitor has not only the characteristics of fixed area γ dose rate monitor, but that of portable meter as well. Its main function is to monitor the areas where dose rate would change without orderliness to prevent unplanned radiation exposure accidents from happening. The design way of the monitor, the main indicators description, the working principle and the comprising of software and hardware are briefly introduced. The monitor has the characteristics of simple installation, easy maintenance, little power consumption, wide range, notability of visual and audible alarm and so on. Its design and technique have novelty and advancement. (authors)

  18. Multilevel power distribution synthesis for a movable flux mapping system

    International Nuclear Information System (INIS)

    Bollacasa, D.; Terney, W.B.; Vincent, G.F.; Dziadosz, D.; Schleicher, T.

    1992-01-01

    A Computer Software package has been developed to support the synthesis of the 3-dimensional power distribution from detector signals from a movable flux mapping system. The power distribution synthesis is based on methodology developed for fixed incore detectors. The full core solution effectively couples all assemblies in the core whether they are instrumented or not. The solution is not subject to approximations for the treatment of assemblies where a measurement cannot be made and provides an accurate representation of axial variations which may be induced by axial blankets, burnable absorber cut back regions and axially zoned flux suppression rods

  19. Suspended 3D pyrolytic carbon microelectrodes for electrochemistry

    DEFF Research Database (Denmark)

    Hemanth, Suhith; Caviglia, Claudia; Keller, Stephan Sylvest

    2017-01-01

    with cyclic voltammetry (CV) and impedance spectroscopy (EIS) using potassium ferri-ferrocyanide redox probe in a custom made batch system with magnetic clamping. Different 3D pyrolytic carbon microelectrodes were compared and the optimal design displayed twice the peak current and half the charge transfer......Carbon microelectrodes have a wide range of applications because of their unique material properties and biocompatibility. This work presents the fabrication and characterization of suspended pyrolytic carbon microstructures serving as three-dimensional (3D) carbon microelectrodes...... for electrochemical applications. A 3D polymer template in epoxy based photoresist (SU-8) was fabricated with multiple steps of UV photolithography and pyrolysed at 900 °C to obtain 3D carbon microelectrodes. The pyrolytic carbon microstructures were characterized by SEM, Raman spectroscopy and XPS to determine...

  20. Sonochemically Fabricated Microelectrode Arrays for Use as Sensing Platforms

    Directory of Open Access Journals (Sweden)

    Stuart D. Collyer

    2010-05-01

    Full Text Available The development, manufacture, modification and subsequent utilisation of sonochemically-formed microelectrode arrays is described for a range of applications. Initial fabrication of the sensing platform utilises ultrasonic ablation of electrochemically insulating polymers deposited upon conductive carbon substrates, forming an array of up to 70,000 microelectrode pores cm–2. Electrochemical and optical analyses using these arrays, their enhanced signal response and stir-independence area are all discussed. The growth of conducting polymeric “mushroom” protrusion arrays with entrapped biological entities, thereby forming biosensors is detailed. The simplicity and inexpensiveness of this approach, lending itself ideally to mass fabrication coupled with unrivalled sensitivity and stir independence makes commercial viability of this process a reality. Application of microelectrode arrays as functional components within sensors include devices for detection of chlorine, glucose, ethanol and pesticides. Immunosensors based on microelectrode arrays are described within this monograph for antigens associated with prostate cancer and transient ischemic attacks (strokes.

  1. Three dimensional MEMS supercapacitors

    Energy Technology Data Exchange (ETDEWEB)

    Sun, Wei

    2011-10-15

    The overall objective of this research is to achieve compact supercapacitors with high capacitance, large power density, and long cycle life for using as micro power sources to drive low power devices and sensors. The main shortcoming of supercapacitors as a power source is that its energy density typically is about 1/10 of that of batteries. To achieve compact supercapacitors of large energy density, supercapacitors must be developed with high capacitance and power density which are mainly depended on the effective surface area of the electrodes of the supercapacitors. Many studies have been done to increase the effective surface area by modifying the electrode materials, however, much less investigations are focus on machining the electrodes. In my thesis work, micro- and nano-technologies are applied as technology approaches for machining the electrodes with three dimensional (3D) microstructures. More specific, Micro-electro-mechanical system (MEMS) fabrication process flow, which integrates the key process such as LIGA-like (German acronym for Lithographie, Galvanoformung, Abformung, which mean Lithography, Electroplating and Molding) technology or DRIE (deep reactive ion etching), has been developed to enable innovative designs of 3D MEMS supercapacitors which own the electrodes of significantly increased geometric area. Two types of 3D MEMS supercapcitors, based on LIGA-like and DRIE technology respectively, were designed and successfully created. The LIGA-like based 3D MEMS supercapacitor is with an interdigital 3D structure, and consists of silicon substrate, two electroplated nickel current collectors, two PPy (poly pyrrole) electrodes, and solid state electrolyte. The fabrication process flow developed includes the flowing key processes, SU-8 lithography, nickel electroplating, PPy polymerization and solid state electrolyte coating. Electrochemical tests showed that the single electrode of the supercapacitor has the specific capacitance of 0.058 F cm-2

  2. MEMS cost analysis from laboratory to industry

    CERN Document Server

    Freng, Ron Lawes

    2016-01-01

    The World of MEMS; Chapter 2: Basic Fabrication Processes; Chapter 3: Surface Microengineering. High Aspect Ratio Microengineering; Chapter 5: MEMS Testing; Chapter 6: MEMS Packaging. Clean Rooms, Buildings and Plant; Chapter 8: The MEMSCOST Spreadsheet; Chapter 9: Product Costs - Accelerometers. Product Costs - Microphones. MEMS Foundries. Financial Reporting and Analysis. Conclusions.

  3. Electrostatic Spray Deposition-Based Manganese Oxide Films-From Pseudocapacitive Charge Storage Materials to Three-Dimensional Microelectrode Integrands.

    Science.gov (United States)

    Agrawal, Richa; Adelowo, Ebenezer; Baboukani, Amin Rabiei; Villegas, Michael Franc; Henriques, Alexandra; Wang, Chunlei

    2017-07-26

    In this study, porous manganese oxide (MnO x ) thin films were synthesized via electrostatic spray deposition (ESD) and evaluated as pseudocapacitive electrode materials in neutral aqueous media. Very interestingly, the gravimetric specific capacitance of the ESD-based electrodes underwent a marked enhancement upon electrochemical cycling, from 72 F∙g -1 to 225 F∙g -1 , with a concomitant improvement in kinetics and conductivity. The change in capacitance and resistivity is attributed to a partial electrochemical phase transformation from the spinel-type hausmannite Mn₃O₄ to the conducting layered birnessite MnO₂. Furthermore, the films were able to retain 88.4% of the maximal capacitance after 1000 cycles. Upon verifying the viability of the manganese oxide films for pseudocapacitive applications, the thin films were integrated onto carbon micro-pillars created via carbon microelectromechanical systems (C-MEMS) for examining their application as potential microelectrode candidates. In a symmetric two-electrode cell setup, the MnO x /C-MEMS microelectrodes were able to deliver specific capacitances as high as 0.055 F∙cm -2 and stack capacitances as high as 7.4 F·cm -3 , with maximal stack energy and power densities of 0.51 mWh·cm -3 and 28.3 mW·cm -3 , respectively. The excellent areal capacitance of the MnO x -MEs is attributed to the pseudocapacitive MnO x as well as the three-dimensional architectural framework provided by the carbon micro-pillars.

  4. Electrostatic Spray Deposition-Based Manganese Oxide Films—From Pseudocapacitive Charge Storage Materials to Three-Dimensional Microelectrode Integrands

    Directory of Open Access Journals (Sweden)

    Richa Agrawal

    2017-07-01

    Full Text Available In this study, porous manganese oxide (MnOx thin films were synthesized via electrostatic spray deposition (ESD and evaluated as pseudocapacitive electrode materials in neutral aqueous media. Very interestingly, the gravimetric specific capacitance of the ESD-based electrodes underwent a marked enhancement upon electrochemical cycling, from 72 F∙g−1 to 225 F∙g−1, with a concomitant improvement in kinetics and conductivity. The change in capacitance and resistivity is attributed to a partial electrochemical phase transformation from the spinel-type hausmannite Mn3O4 to the conducting layered birnessite MnO2. Furthermore, the films were able to retain 88.4% of the maximal capacitance after 1000 cycles. Upon verifying the viability of the manganese oxide films for pseudocapacitive applications, the thin films were integrated onto carbon micro-pillars created via carbon microelectromechanical systems (C-MEMS for examining their application as potential microelectrode candidates. In a symmetric two-electrode cell setup, the MnOx/C-MEMS microelectrodes were able to deliver specific capacitances as high as 0.055 F∙cm−2 and stack capacitances as high as 7.4 F·cm−3, with maximal stack energy and power densities of 0.51 mWh·cm−3 and 28.3 mW·cm−3, respectively. The excellent areal capacitance of the MnOx-MEs is attributed to the pseudocapacitive MnOx as well as the three-dimensional architectural framework provided by the carbon micro-pillars.

  5. Electrical Characterization of 3D Au Microelectrodes for Use in Retinal Prostheses.

    Science.gov (United States)

    Lee, Sangmin; Ahn, Jae Hyun; Seo, Jong-Mo; Chung, Hum; Cho, Dong-Il Dan

    2015-06-17

    In order to provide high-quality visual information to patients who have implanted retinal prosthetic devices, the number of microelectrodes should be large. As the number of microelectrodes is increased, the dimensions of each microelectrode must be decreased, which in turn results in an increased microelectrode interface impedance and decreased injection current dynamic range. In order to improve the trade-off envelope between the number of microelectrodes and the current injection characteristics, a 3D microelectrode structure can be used as an alternative. In this paper, the electrical characteristics of 2D and 3D Au microelectrodes were investigated. In order to examine the effects of the structural difference, 2D and 3D Au microelectrodes with different base areas but similar effective surface areas were fabricated and evaluated. Interface impedances were measured and similar dynamic ranges were obtained for both 2D and 3D Au microelectrodes. These results indicate that more electrodes can be implemented in the same area if 3D designs are used. Furthermore, the 3D Au microelectrodes showed substantially enhanced electrical durability characteristics against over-injected stimulation currents, withstanding electrical currents that are much larger than the limit measured for 2D microelectrodes of similar area. This enhanced electrical durability property of 3D Au microelectrodes is a new finding in microelectrode research, and makes 3D microelectrodes very desirable devices.

  6. Electrical Characterization of 3D Au Microelectrodes for Use in Retinal Prostheses

    Directory of Open Access Journals (Sweden)

    Sangmin Lee

    2015-06-01

    Full Text Available In order to provide high-quality visual information to patients who have implanted retinal prosthetic devices, the number of microelectrodes should be large. As the number of microelectrodes is increased, the dimensions of each microelectrode must be decreased, which in turn results in an increased microelectrode interface impedance and decreased injection current dynamic range. In order to improve the trade-off envelope between the number of microelectrodes and the current injection characteristics, a 3D microelectrode structure can be used as an alternative. In this paper, the electrical characteristics of 2D and 3D Au microelectrodes were investigated. In order to examine the effects of the structural difference, 2D and 3D Au microelectrodes with different base areas but similar effective surface areas were fabricated and evaluated. Interface impedances were measured and similar dynamic ranges were obtained for both 2D and 3D Au microelectrodes. These results indicate that more electrodes can be implemented in the same area if 3D designs are used. Furthermore, the 3D Au microelectrodes showed substantially enhanced electrical durability characteristics against over-injected stimulation currents, withstanding electrical currents that are much larger than the limit measured for 2D microelectrodes of similar area. This enhanced electrical durability property of 3D Au microelectrodes is a new finding in microelectrode research, and makes 3D microelectrodes very desirable devices.

  7. 49 CFR 236.312 - Movable bridge, interlocking of signal appliances with bridge devices.

    Science.gov (United States)

    2010-10-01

    ... 49 Transportation 4 2010-10-01 2010-10-01 false Movable bridge, interlocking of signal appliances with bridge devices. 236.312 Section 236.312 Transportation Other Regulations Relating to... SYSTEMS, DEVICES, AND APPLIANCES Interlocking Standards § 236.312 Movable bridge, interlocking of signal...

  8. Dynamic posturography using a new movable multidirectional platform driven by gravity.

    NARCIS (Netherlands)

    Commissaris, D.A.C.M.; Nieuwenhuijzen, P.H.J.A.; Overeem, S.; Vos, A. de; Duysens, J.E.J.; Bloem, B.R.

    2002-01-01

    Human upright balance control can be quantified using movable platforms driven by servo-controlled torque motors (dynamic posturography). We introduce a new movable platform driven by the force of gravity acting upon the platform and the subject standing on it. The platform consists of a 1 m2 metal

  9. Dynamic posturography using a new movable multidirectional platform driven by gravity

    NARCIS (Netherlands)

    Commissaris, D.A.C.M.; Nieuwenhuijzen, P.H.J.A.; Overeem, S.; Vos, A. de; Duysens, J.E.J.; Bloem, B.R.

    2002-01-01

    Human upright balance control can be quantified using movable platforms driven by servo-controlled torque motors (dynamic posturography). We introduce a new movable platform driven by the force of gravity acting upon the platform and the subject standing on it. The platform consists of a 1 m(2)

  10. The Power of Collateral : How Problems in Securing Transections Limit Private Credit from Movable Property

    OpenAIRE

    Fleisig, Heywood

    1995-01-01

    In many developing countries, faulty laws and regulations make it hard to use livestock, machines, equipment, standing crops, and other movable property as collateral. The resulting constraints on access to credit hurt economies. In Bolivia, for example, a faulty legal and regulatory framework for the use of movable property as collateral has led to a loss in GDP estimated at between 5 and...

  11. Glassy carbon MEMS for novel origami-styled 3D integrated intracortical and epicortical neural probes

    Science.gov (United States)

    Goshi, Noah; Castagnola, Elisa; Vomero, Maria; Gueli, Calogero; Cea, Claudia; Zucchini, Elena; Bjanes, David; Maggiolini, Emma; Moritz, Chet; Kassegne, Sam; Ricci, Davide; Fadiga, Luciano

    2018-06-01

    We report on a novel technology for microfabricating 3D origami-styled micro electro-mechanical systems (MEMS) structures with glassy carbon (GC) features and a supporting polymer substrate. GC MEMS devices that open to form 3D microstructures are microfabricated from GC patterns that are made through pyrolysis of polymer precursors on high-temperature resisting substrates like silicon or quartz and then transferring the patterned devices to a flexible substrate like polyimide followed by deposition of an insulation layer. The devices on flexible substrate are then folded into 3D form in an origami-fashion. These 3D MEMS devices have tunable mechanical properties that are achieved by selectively varying the thickness of the polymeric substrate and insulation layers at any desired location. This technology opens new possibilities by enabling microfabrication of a variety of 3D GC MEMS structures suited to applications ranging from biochemical sensing to implantable microelectrode arrays. As a demonstration of the technology, a neural signal recording microelectrode array platform that integrates both surface (cortical) and depth (intracortical) GC microelectrodes onto a single flexible thin-film device is introduced. When the device is unfurled, a pre-shaped shank of polyimide automatically comes off the substrate and forms the penetrating part of the device in a 3D fashion. With the advantage of being highly reproducible and batch-fabricated, the device introduced here allows for simultaneous recording of electrophysiological signals from both the brain surface (electrocorticography—ECoG) and depth (single neuron). Our device, therefore, has the potential to elucidate the roles of underlying neurons on the different components of µECoG signals. For in vivo validation of the design capabilities, the recording sites are coated with a poly(3,4-ethylenedioxythiophene)—polystyrene sulfonate—carbon nanotube composite, to improve the electrical conductivity of the

  12. MEMS digital parametric loudspeaker

    KAUST Repository

    Carreno, Armando Arpys Arevalo

    2016-03-23

    This paper reports on the design and fabrication of MEMS actuator arrays suitable for Digital Sound reconstruction and Parametric Directional Loudspeakers. Two distinct versions of the device were fabricated: one using the electrostatic principle actuation and the other one, the piezoelectric principle. Both versions used similar membrane dimensions, with a diameter of 500 μm. These devices are the smallest Micro-Machined Ultrasound Transducer (MUT) arrays that can be operated for both modes: Digital Sound Reconstruction and Parametric Loudspeaker. The chips consist of an array with 256 transducers, in a footprint of 12 mm by 12 mm. The total single chip size is: 2.3 cm by 2.3 cm, including the contact pads. © 2016 IEEE.

  13. Tribology and MEMS

    International Nuclear Information System (INIS)

    Williams, J A; Le, H R

    2006-01-01

    Micro-electro-mechanical system, MEMS, is a rapidly growing interdisciplinary technology dealing with the design and manufacture of miniaturized machines with the major dimensions at the scale of tens, to perhaps hundreds, of micrometres. Because they depend on the cube of a representative dimension, component masses and inertias rapidly become small as size decreases whereas surface and tribological effects, which often depend on area, become increasingly important. Although our explanations of macroscopic tribological phenomena often involve individual events occurring at the micro-scale, when the overall component size is itself miniaturized it may be necessary to re-evaluate some conventional tribological solutions. While the absolute loads are small in such micro-devices, the tribological requirements, especially in terms of longevity-which may be limited by wear rather than friction-are particularly demanding and will require imaginative and novel solutions. (topical review)

  14. MEMS digital parametric loudspeaker

    KAUST Repository

    Carreno, Armando Arpys Arevalo; Castro, David; Conchouso Gonzalez, David; Kosel, Jü rgen; Foulds, Ian G.

    2016-01-01

    This paper reports on the design and fabrication of MEMS actuator arrays suitable for Digital Sound reconstruction and Parametric Directional Loudspeakers. Two distinct versions of the device were fabricated: one using the electrostatic principle actuation and the other one, the piezoelectric principle. Both versions used similar membrane dimensions, with a diameter of 500 μm. These devices are the smallest Micro-Machined Ultrasound Transducer (MUT) arrays that can be operated for both modes: Digital Sound Reconstruction and Parametric Loudspeaker. The chips consist of an array with 256 transducers, in a footprint of 12 mm by 12 mm. The total single chip size is: 2.3 cm by 2.3 cm, including the contact pads. © 2016 IEEE.

  15. An implantable integrated low-power amplifier-microelectrode array for Brain-Machine Interfaces.

    Science.gov (United States)

    Patrick, Erin; Sankar, Viswanath; Rowe, William; Sanchez, Justin C; Nishida, Toshikazu

    2010-01-01

    One of the important challenges in designing Brain-Machine Interfaces (BMI) is to build implantable systems that have the ability to reliably process the activity of large ensembles of cortical neurons. In this paper, we report the design, fabrication, and testing of a polyimide-based microelectrode array integrated with a low-power amplifier as part of the Florida Wireless Integrated Recording Electrode (FWIRE) project at the University of Florida developing a fully implantable neural recording system for BMI applications. The electrode array was fabricated using planar micromachining MEMS processes and hybrid packaged with the amplifier die using a flip-chip bonding technique. The system was tested both on bench and in-vivo. Acute and chronic neural recordings were obtained from a rodent for a period of 42 days. The electrode-amplifier performance was analyzed over the chronic recording period with the observation of a noise floor of 4.5 microVrms, and an average signal-to-noise ratio of 3.8.

  16. A microelectrode array electrodeposited with reduced graphene oxide and Pt nanoparticles for norepinephrine and electrophysiological recordings

    Science.gov (United States)

    Wang, Li; Song, Yilin; Zhang, Yu; Xu, Shengwei; Xu, Huiren; Wang, Mixia; Wang, Yang; Cai, Xinxia

    2017-11-01

    Norepinephrine (NE), a common neurotransmitter released by locus coeruleus neurons, plays an essential role in the communication mechanism of the mammalian nervous system. In this work, a microelectrode array (MEA) was fabricated by micro-electromechanical system (MEMS) technology to provide a rapid, sensitive and reliable method for the direct determination in NE dynamic secretion. To improve the electrical performance, the MEA was electrodeposited with the reduced graphene oxide and Pt nanoparticles (rGOPNps). rGOPNps-MEA was investigated using scanning electron microscopy, atomic force microscopy and electrochemical impedance spectroscopy, differential pulse voltammetry exhibited remarkably electrocatalytic properties towards NE. Calibration results showed a sensitivity of 1.03 nA µM-1 to NE with a detection limit of 0.08 µM. In Particular, the MEA was successfully used for measuring dynamic extracellular NE secretion from the locus coeruleus brain slice, as well as monitoring spike firing from the hippocampal brain slice. This fabricated device has potential in studies of spatially resolved delivery of trace neurochemicals and electrophysiological activities of a variety of biological tissues in vitro.

  17. Safety Performance Evaluations for the Vehicle Based Movable Barriers Using Full Scale Crash Tests

    Directory of Open Access Journals (Sweden)

    Jin Minsoo

    2017-01-01

    Full Text Available The present study aims to develop a prototype of large-size movable barriers to protect roadside workers from incoming vehicles to the road work area with the following functions: maximization of work space in the right and left directions, convenient mobility, and minimization of impact without modification of the inside of movable barriers into traffic lanes and perform safety performance assessment on passengers through full scale crash tests. The large movable barrier was divided into folder type and telescope type and the development stage was now at the prototype phase. A full scale crash test was conducted prior to certification test at a level of 90%. The full scale crash test result showed that both types of folder type movable barrier and telescope type movable barrier satisfied the standard of the passenger safety performance evaluation at a level of 90%.

  18. Topological design of compliant smart structures with embedded movable actuators

    International Nuclear Information System (INIS)

    Wang, Yiqiang; Zhang, Xiaopeng; Kang, Zhan; Luo, Zhen

    2014-01-01

    In the optimal configuration design of piezoelectric smart structures, it is favorable to use actuation elements with certain predefined geometries from the viewpoint of manufacturability of fragile piezoelectric ceramics in practical applications. However, preserving the exact shape of these embedded actuators and tracking their dynamic motions presents a more challenging research task than merely allowing them to take arbitrary shapes. This paper proposes an integrated topology optimization method for the systematic design of compliant smart structures with embedded movable PZT (lead zirconate titanate) actuators. Compared with most existing studies, which either optimize positions/sizes of the actuators in a given host structure or design the host structure with pre-determined actuator locations, the proposed method simultaneously optimizes the positions of the movable PZT actuators and the topology of the host structure, typically a compliant mechanism for amplifying the small strain stroke. A combined topological description model is employed in the optimization, where the level set model is used to track the movements of the PZT actuators and the independent point-wise density interpolation (iPDI) approach is utilized to search for the optimal topology of the host structure. Furthermore, we define an integral-type constraint function to prevent overlaps between the PZT actuators and between the actuators and the external boundaries of the design domain. Such a constraint provides a unified and explicit mathematical statement of the non-overlap condition for any number of arbitrarily shaped embedded actuators. Several numerical examples are used to demonstrate the effectiveness of the proposed optimization method. (paper)

  19. MEMS for automotive and aerospace applications

    CERN Document Server

    Kraft, Michael

    2013-01-01

    MEMS for automotive and aerospace applications reviews the use of Micro-Electro-Mechanical-Systems (MEMS) in developing solutions to the unique challenges presented by the automotive and aerospace industries.Part one explores MEMS for a variety of automotive applications. The role of MEMS in passenger safety and comfort, sensors for automotive vehicle stability control applications and automotive tire pressure monitoring systems are considered, along with pressure and flow sensors for engine management, and RF MEMS for automotive radar sensors. Part two then goes on to explore MEMS for

  20. Modeling and Simulation of Microelectrode-Retina Interactions

    Energy Technology Data Exchange (ETDEWEB)

    Beckerman, M

    2002-11-30

    The goal of the retinal prosthesis project is the development of an implantable microelectrode array that can be used to supply visually-driven electrical input to cells in the retina, bypassing nonfunctional rod and cone cells, thereby restoring vision to blind individuals. This goal will be achieved through the study of the fundamentals of electrical engineering, vision research, and biomedical engineering with the aim of acquiring the knowledge needed to engineer a high-density microelectrode-tissue hybrid sensor that will restore vision to millions of blind persons. The modeling and simulation task within this project is intended to address the question how best to stimulate, and communicate with, cells in the retina using implanted microelectrodes.

  1. Glass pipette-carbon fiber microelectrodes for evoked potential recordings

    Directory of Open Access Journals (Sweden)

    Moraes M.F.D.

    1997-01-01

    Full Text Available Current methods for recording field potentials with tungsten electrodes make it virtually impossible to use the same recording electrode also as a lesioning electrode, for example for histological confirmation of the recorded site, because the lesioning procedure usually wears off the tungsten tip. Therefore, the electrode would have to be replaced after each lesioning procedure, which is a very high cost solution to the problem. We present here a low cost, easy to make, high quality glass pipette-carbon fiber microelectrode that shows resistive, signal/noise and electrochemical coupling advantages over tungsten electrodes. Also, currently used carbon fiber microelectrodes often show problems with electrical continuity, especially regarding electrochemical applications using a carbon-powder/resin mixture, with consequent low performance, besides the inconvenience of handling such a mixture. We propose here a new method for manufacturing glass pipette-carbon fiber microelectrodes with several advantages when recording intracerebral field potentials

  2. Combined Reactor and Microelectrode Measurements in Laboratory Grown Biofilms

    DEFF Research Database (Denmark)

    Larsen, Tove; Harremoës, Poul

    1994-01-01

    A combined biofilm reactor-/microelectrode experimental set-up has been constructed, allowing for simultaneous reactor mass balances and measurements of concentration profiles within the biofilm. The system consists of an annular biofilm reactor equipped with an oxygen microelectrode. Experiments...... were carried out with aerobic glucose and starch degrading biofilms. The well described aerobic glucose degradation biofilm system was used to test the combined reactor set-up. Results predicted from known biofilm kinetics were obtained. In the starch degrading biofilm, basic assumptions were tested...... with the microelectrode measurements. It was established, that even with a high molecular weight, non-diffusible substrate, degradation took place in the depths of the biofilm. Intrinsic enzymatic hydrolysis was not limiting and the volumetric removal rate of oxygen was zero order....

  3. Piezoelectric MEMS: Ferroelectric thin films for MEMS applications

    Science.gov (United States)

    Kanno, Isaku

    2018-04-01

    In recent years, piezoelectric microelectromechanical systems (MEMS) have attracted attention as next-generation functional microdevices. Typical applications of piezoelectric MEMS are micropumps for inkjet heads or micro-gyrosensors, which are composed of piezoelectric Pb(Zr,Ti)O3 (PZT) thin films and have already been commercialized. In addition, piezoelectric vibration energy harvesters (PVEHs), which are regarded as one of the key devices for Internet of Things (IoT)-related technologies, are promising future applications of piezoelectric MEMS. Significant features of piezoelectric MEMS are their simple structure and high energy conversion efficiency between mechanical and electrical domains even on the microscale. The device performance strongly depends on the function of the piezoelectric thin films, especially on their transverse piezoelectric properties, indicating that the deposition of high-quality piezoelectric thin films is a crucial technology for piezoelectric MEMS. On the other hand, although the difficulty in measuring the precise piezoelectric coefficients of thin films is a serious obstacle in the research and development of piezoelectric thin films, a simple unimorph cantilever measurement method has been proposed to obtain precise values of the direct or converse transverse piezoelectric coefficient of thin films, and recently this method has become to be the standardized testing method. In this article, I will introduce fundamental technologies of piezoelectric thin films and related microdevices, especially focusing on the deposition of PZT thin films and evaluation methods for their transverse piezoelectric properties.

  4. CMOS MEMS Fabrication Technologies and Devices

    Directory of Open Access Journals (Sweden)

    Hongwei Qu

    2016-01-01

    Full Text Available This paper reviews CMOS (complementary metal-oxide-semiconductor MEMS (micro-electro-mechanical systems fabrication technologies and enabled micro devices of various sensors and actuators. The technologies are classified based on the sequence of the fabrication of CMOS circuitry and MEMS elements, while SOI (silicon-on-insulator CMOS MEMS are introduced separately. Introduction of associated devices follows the description of the respective CMOS MEMS technologies. Due to the vast array of CMOS MEMS devices, this review focuses only on the most typical MEMS sensors and actuators including pressure sensors, inertial sensors, frequency reference devices and actuators utilizing different physics effects and the fabrication processes introduced. Moreover, the incorporation of MEMS and CMOS is limited to monolithic integration, meaning wafer-bonding-based stacking and other integration approaches, despite their advantages, are excluded from the discussion. Both competitive industrial products and state-of-the-art research results on CMOS MEMS are covered.

  5. Microelectromechanical (MEM) thermal actuator

    Science.gov (United States)

    Garcia, Ernest J [Albuquerque, NM; Fulcher, Clay W. G. [Sandia Park, NM

    2012-07-31

    Microelectromechanical (MEM) buckling beam thermal actuators are disclosed wherein the buckling direction of a beam is constrained to a desired direction of actuation, which can be in-plane or out-of-plane with respect to a support substrate. The actuators comprise as-fabricated, linear beams of uniform cross section supported above the substrate by supports which rigidly attach a beam to the substrate. The beams can be heated by methods including the passage of an electrical current through them. The buckling direction of an initially straight beam upon heating and expansion is controlled by incorporating one or more directional constraints attached to the substrate and proximal to the mid-point of the beam. In the event that the beam initially buckles in an undesired direction, deformation of the beam induced by contact with a directional constraint generates an opposing force to re-direct the buckling beam into the desired direction. The displacement and force generated by the movement of the buckling beam can be harnessed to perform useful work, such as closing contacts in an electrical switch.

  6. MEMS Reliability Assurance Activities at JPL

    Science.gov (United States)

    Kayali, S.; Lawton, R.; Stark, B.

    2000-01-01

    An overview of Microelectromechanical Systems (MEMS) reliability assurance and qualification activities at JPL is presented along with the a discussion of characterization of MEMS structures implemented on single crystal silicon, polycrystalline silicon, CMOS, and LIGA processes. Additionally, common failure modes and mechanisms affecting MEMS structures, including radiation effects, are discussed. Common reliability and qualification practices contained in the MEMS Reliability Assurance Guideline are also presented.

  7. Modeling nonlinearities in MEMS oscillators.

    Science.gov (United States)

    Agrawal, Deepak K; Woodhouse, Jim; Seshia, Ashwin A

    2013-08-01

    We present a mathematical model of a microelectromechanical system (MEMS) oscillator that integrates the nonlinearities of the MEMS resonator and the oscillator circuitry in a single numerical modeling environment. This is achieved by transforming the conventional nonlinear mechanical model into the electrical domain while simultaneously considering the prominent nonlinearities of the resonator. The proposed nonlinear electrical model is validated by comparing the simulated amplitude-frequency response with measurements on an open-loop electrically addressed flexural silicon MEMS resonator driven to large motional amplitudes. Next, the essential nonlinearities in the oscillator circuit are investigated and a mathematical model of a MEMS oscillator is proposed that integrates the nonlinearities of the resonator. The concept is illustrated for MEMS transimpedance-amplifier- based square-wave and sine-wave oscillators. Closed-form expressions of steady-state output power and output frequency are derived for both oscillator models and compared with experimental and simulation results, with a good match in the predicted trends in all three cases.

  8. Structured synthesis of MEMS using evolutionary approaches

    DEFF Research Database (Denmark)

    Fan, Zhun; Wang, Jiachuan; Achiche, Sofiane

    2008-01-01

    In this paper, we discuss the hierarchy that is involved in a typical MEMS design and how evolutionary approaches can be used to automate the hierarchical synthesis process for MEMS. The paper first introduces the flow of a structured MEMS design process and emphasizes that system-level lumped...

  9. A six degrees of freedom mems manipulator

    NARCIS (Netherlands)

    de Jong, B.R.

    2006-01-01

    This thesis reports about a six degrees of freedom (DOF) precision manipulator in MEMS, concerning concept generation for the manipulator followed by design and fabrication (of parts) of the proposed manipulation concept in MEMS. Researching the abilities of 6 DOF precision manipulation in MEMS is

  10. Electrostatic MEMS devices with high reliability

    Science.gov (United States)

    Goldsmith, Charles L; Auciello, Orlando H; Sumant, Anirudha V; Mancini, Derrick C; Gudeman, Chris; Sampath, Suresh; Carlilse, John A; Carpick, Robert W; Hwang, James

    2015-02-24

    The present invention provides for an electrostatic microelectromechanical (MEMS) device comprising a dielectric layer separating a first conductor and a second conductor. The first conductor is moveable towards the second conductor, when a voltage is applied to the MEMS device. The dielectric layer recovers from dielectric charging failure almost immediately upon removal of the voltage from the MEMS device.

  11. 3D Traffic Scene Understanding From Movable Platforms.

    Science.gov (United States)

    Geiger, Andreas; Lauer, Martin; Wojek, Christian; Stiller, Christoph; Urtasun, Raquel

    2014-05-01

    In this paper, we present a novel probabilistic generative model for multi-object traffic scene understanding from movable platforms which reasons jointly about the 3D scene layout as well as the location and orientation of objects in the scene. In particular, the scene topology, geometry, and traffic activities are inferred from short video sequences. Inspired by the impressive driving capabilities of humans, our model does not rely on GPS, lidar, or map knowledge. Instead, it takes advantage of a diverse set of visual cues in the form of vehicle tracklets, vanishing points, semantic scene labels, scene flow, and occupancy grids. For each of these cues, we propose likelihood functions that are integrated into a probabilistic generative model. We learn all model parameters from training data using contrastive divergence. Experiments conducted on videos of 113 representative intersections show that our approach successfully infers the correct layout in a variety of very challenging scenarios. To evaluate the importance of each feature cue, experiments using different feature combinations are conducted. Furthermore, we show how by employing context derived from the proposed method we are able to improve over the state-of-the-art in terms of object detection and object orientation estimation in challenging and cluttered urban environments.

  12. Multiscale modeling of porous ceramics using movable cellular automaton method

    Science.gov (United States)

    Smolin, Alexey Yu.; Smolin, Igor Yu.; Smolina, Irina Yu.

    2017-10-01

    The paper presents a multiscale model for porous ceramics based on movable cellular automaton method, which is a particle method in novel computational mechanics of solid. The initial scale of the proposed approach corresponds to the characteristic size of the smallest pores in the ceramics. At this scale, we model uniaxial compression of several representative samples with an explicit account of pores of the same size but with the unique position in space. As a result, we get the average values of Young's modulus and strength, as well as the parameters of the Weibull distribution of these properties at the current scale level. These data allow us to describe the material behavior at the next scale level were only the larger pores are considered explicitly, while the influence of small pores is included via effective properties determined earliar. If the pore size distribution function of the material has N maxima we need to perform computations for N-1 levels in order to get the properties step by step from the lowest scale up to the macroscale. The proposed approach was applied to modeling zirconia ceramics with bimodal pore size distribution. The obtained results show correct behavior of the model sample at the macroscale.

  13. Superconducting polarizing magnet for a movable polarized target

    International Nuclear Information System (INIS)

    Anishchenko, N.G.; Bartenev, V.D.; Blinov, N.A.

    1998-01-01

    The superconducting polarizing magnet was constructed for the JINR (Dubna) movable polarized target (MPT) with working volume 200 mm long and 30 mm in diameter. The magnet provides a polarizing magnetic field up to 6 T in the centre with the uniformity of 4.5 x 10 -4 in the working volume of the target. The magnet contains a main solenoidal winding 558 mm long and 206/144 mm in diameters, and compensating and correcting winding placed at its ends. The windings are made of a NbTi wire, impregnated with the epoxy resin and placed in the horizontal cryostat. The diameter of the 'warm' aperture of the magnet cryostat is 96 mm. The design and technology of the magnet winding are described. Results of the magnetic field map measurements, using a NMR-magnetometer are given. A similar magnet constructed at DAPNIA, CEA/Saclay (France), represented a model for the present development. The MPT array is installed in the beam line of polarized neutrons produced by break-up of polarized deuterons extracted from the synchrophasotron of the Laboratory of High Energies (LHE), JINR (Dubna)

  14. Coronary angioscopy: a monorail angioscope with movable guide wire.

    Science.gov (United States)

    Nanto, S; Ohara, T; Mishima, M; Hirayama, A; Komamura, K; Matsumura, Y; Kodama, K

    1991-03-01

    A new angioscope was devised for easier visualization of the coronary artery. In its tip, the angioscope (Olympus) with an outer diameter of 0.8 mm had a metal lumen, through which a 0.014-in steerable guide wire passed. Using a 8F guiding catheter and a guide wire, it was introduced into the distal coronary artery. With injection of warmed saline through the guiding catheter, the coronary segments were visualized. In the attempted 70 vessels (32 left anterior descending [LAD], 10 right coronary [RCA], 28 left circumflex [LCX]) from 48 patients, 60 vessels (86%) were successfully examined. Twenty-two patients who underwent attempted examination of both LAD and LCX; both coronary arteries were visualized in 19 patients (86%). In the proximal site of the lesion, 40 patients have the diagonal branch or the obtuse marginal branch. In 34 patients (85%) the angioscope was inserted beyond these branches. In 12 very tortuous vessels, eight vessels (67%) were examined. In conclusion, the new monorail coronary angioscope with movable guide wire is useful to examine the stenotic lesions of the coronary artery.

  15. Microelectrodes as novel research tools for environmental biofilm studies

    International Nuclear Information System (INIS)

    Yu, T.; Lu, R.; Bishop, L.

    2002-01-01

    Biofilm processes are widely utilized in environmental engineering for biodegradation of contaminated waters, gases and soils. It is important to understand the structure and functions of biofilms. Microelectrodes are novel experimental tools for environmental biofilm studies. The authors reviewed the techniques of oxygen, sulfide, redox potential and pH microelectrode. These microelectrodes have tip diameters of 3 to 20 μm, resulting a high spatial resolution. They enable us directly measure the chemical conditions as results of microbial activities in biofilms. The authors also reported the laboratory and field studies of wastewater biofilms using microelectrode techniques. The results of these studies provided experimental evidence on the stratification of microbial processes and the associated redox potential change in wastewater biofilms: (1) The oxygen penetration depth was only a fraction of the biofilm thickness. This observation, first made under laboratory conditions, has been confirmed under field conditions. (2) The biofilms with both aerobic oxidation and sulfate reduction had a clearly stratified structure. This was evidenced by a sharp decrease of redox potential near the interface between the aerobic zone and the sulfate reduction zone within the biofilm. In this type of biofilms, aerobic oxidation took place only in a shallow layer near the biofilm surface and sulfate reduction occurred in the deeper anoxic zone. (3) The redox potential changed with the shift of primary microbial process in biofilms, indicating that it is possible to use redox potential to help illustrate the structure and functions of biofilms. (author)

  16. Microelectrode measurements of the activity distribution in nitrifying bacterial aggregates

    NARCIS (Netherlands)

    Beer, de D.; Heuvel, van den J.C.; Ottengraf, S.P.P.

    1993-01-01

    Microelectrodes for ammonium, oxygen, nitrate, and pH were used to study nitrifying aggregates grown in a fluidized-bed reactor. Local reactant fluxes and distribution of microbial activity could be detd. from the microprofiles. The interfacial fluxes of the reactants closely reflected the

  17. Integration of Polymer Micro-Electrodes for Bio-Sensing

    DEFF Research Database (Denmark)

    Argyraki, Aikaterini; Larsen, Simon Tylsgaard; Tanzi, Simone

    We present the fabrication of PEDOT and pyrolyzed micro-electrodes for the detection of neurotransmitter exocytosis from single cells. The patterns of the electrodes are defined with photolithography. The micro-electro-fluidic-chips were fabricated by bonding two injection molded TOPAS parts. Pol...

  18. Multi-microelectrode devices for intrafascicular use in peripheral nerve

    NARCIS (Netherlands)

    Rutten, Wim

    1996-01-01

    This minisymposium paper gives an overview of experimental, modeling, design and microfabrication steps which lead towards the University of Twente three-dimensional 128-fold silicon microelectrode device. The device is meant for implantation in peripheral nerve for neuromuscular control purposes

  19. A Platform for Manufacturable Stretchable Micro-electrode Arrays

    NARCIS (Netherlands)

    Khoshfetrat Pakazad, S.; Savov, A.; Braam, S.R.; Dekker, R.

    2012-01-01

    A platform for the batch fabrication of pneumatically actuated Stretchable Micro-Electrode Arrays (SMEAs) by using state-of-the-art micro-fabrication techniques and materials is demonstrated. The proposed fabrication process avoids the problems normally associated with processing of thin film

  20. AFM cantilever with in situ renewable mercury microelectrode

    NARCIS (Netherlands)

    Schön, Peter Manfred; Geerlings, J.; Tas, Niels Roelof; Sarajlic, Edin

    2013-01-01

    We report here first results obtained on a novel, in situ renewable mercury microelectrode integrated into an atomic force microscopy (AFM) cantilever. Our approach is based on a fountain pen probe with appropriate dimensions enabling reversible filling with(nonwetting) mercury under changing the

  1. Lability criteria for metal complexes in micro-electrode voltammetry

    NARCIS (Netherlands)

    Leeuwen, van H.P.; Pinheiro, J.P.

    1999-01-01

    Theoretical expressions are derived for the voltammetric lability criteria of metal complexes in the micro-electrode regime. The treatment includes three limiting situations: (i) the macro-electrode limit, where both the diffusion layer and the dissociation reaction layer are linear; (ii) an

  2. MEMS applications in space exploration

    Science.gov (United States)

    Tang, William C.

    1997-09-01

    Space exploration in the coming century will emphasize cost effectiveness and highly focused mission objectives, which will result in frequent multiple missions that broaden the scope of space science and to validate new technologies on a timely basis. MEMS is one of the key enabling technology to create cost-effective, ultra-miniaturized, robust, and functionally focused spacecraft for both robotic and human exploration programs. Examples of MEMS devices at various stages of development include microgyroscope, microseismometer, microhygrometer, quadrupole mass spectrometer, and micropropulsion engine. These devices, when proven successful, will serve as models for developing components and systems for new-millennium spacecraft.

  3. MEMS linear and nonlinear statics and dynamics

    CERN Document Server

    Younis, Mohammad I

    2011-01-01

    MEMS Linear and Nonlinear Statics and Dynamics presents the necessary analytical and computational tools for MEMS designers to model and simulate most known MEMS devices, structures, and phenomena. This book also provides an in-depth analysis and treatment of the most common static and dynamic phenomena in MEMS that are encountered by engineers. Coverage also includes nonlinear modeling approaches to modeling various MEMS phenomena of a nonlinear nature, such as those due to electrostatic forces, squeeze-film damping, and large deflection of structures. The book also: Includes examples of nume

  4. Movable limiter experiment on TPE-1RM15 reversed field pinch machine

    International Nuclear Information System (INIS)

    Yagi, Yasuyuki; Shimada, Toshio; Hirota, Isao; Maejima, Yoshiki; Hirano, Yoichi; Ogawa, Kiyoshi

    1989-01-01

    Two movable limiters with a graphite head (35 mm Φ x 40 mm high) were installed in TPE-1RM15 reversed field pinch (RFP) machine. Measurement of the heat flux input to the movable limiters and the effect of the insertion of the limiter on plasma properties, as well as surface analyses of the graphite head after the exposure, were conducted. The heat flux input into the electron drift side of the limiter exceeded that from the ion drift side by factor of 4-6 at the maximum insertion of the limiters (10 mm inward from the shadow of the fixed limiters). This factor increased as the movable limiter protruded into the plasma, and this profile is attributed to the change of the pitch profile of the magnetic field line at the plasma periphery. At the maximum insertion of the two movable limiters, the energy input into a graphite head was about 10% of the joule input energy during the current sustainment phase. The one turn loop voltage and plasma resistance increased when the movable limiters were inserted beyond the shadow of the fixed limiters, and the increment of the joule input power roughly correlates with the increment of the loss power into the protruded movable limiters. Unbalanced position scanning showed that the relative distance of a movable limiter from the plasma column was not affected by another movable limiter installed 180 0 toroidally away from the former limiter. Fundamental surface analyses of the graphite head showed that deposition of metal impurities (Fe and Cr) was higher at the corner of the ion drift side than that of the electron shift side, and that the corner of the electron drift side was more roughened than the ion drift side. (orig.)

  5. Movable geometry and eigenvalue search capability in the MC21 Monte Carlo code

    International Nuclear Information System (INIS)

    Gill, D. F.; Nease, B. R.; Griesheimer, D. P.

    2013-01-01

    A description of a robust and flexible movable geometry implementation in the Monte Carlo code MC21 is described along with a search algorithm that can be used in conjunction with the movable geometry capability to perform eigenvalue searches based on the position of some geometric component. The natural use of the combined movement and search capability is searching to critical through variation of control rod (or control drum) position. The movable geometry discussion provides the mathematical framework for moving surfaces in the MC21 combinatorial solid geometry description. A discussion of the interface between the movable geometry system and the user is also described, particularly the ability to create a hierarchy of movable groups. Combined with the hierarchical geometry description in MC21 the movable group framework provides a very powerful system for inline geometry modification. The eigenvalue search algorithm implemented in MC21 is also described. The foundations of this algorithm are a regula falsi search though several considerations are made in an effort to increase the efficiency of the algorithm for use with Monte Carlo. Specifically, criteria are developed to determine after each batch whether the Monte Carlo calculation should be continued, the search iteration can be rejected, or the search iteration has converged. These criteria seek to minimize the amount of time spent per iteration. Results for the regula falsi method are shown, illustrating that the method as implemented is indeed convergent and that the optimizations made ultimately reduce the total computational expense. (authors)

  6. Movable geometry and eigenvalue search capability in the MC21 Monte Carlo code

    Energy Technology Data Exchange (ETDEWEB)

    Gill, D. F.; Nease, B. R.; Griesheimer, D. P. [Bettis Atomic Power Laboratory, PO Box 79, West Mifflin, PA 15122 (United States)

    2013-07-01

    A description of a robust and flexible movable geometry implementation in the Monte Carlo code MC21 is described along with a search algorithm that can be used in conjunction with the movable geometry capability to perform eigenvalue searches based on the position of some geometric component. The natural use of the combined movement and search capability is searching to critical through variation of control rod (or control drum) position. The movable geometry discussion provides the mathematical framework for moving surfaces in the MC21 combinatorial solid geometry description. A discussion of the interface between the movable geometry system and the user is also described, particularly the ability to create a hierarchy of movable groups. Combined with the hierarchical geometry description in MC21 the movable group framework provides a very powerful system for inline geometry modification. The eigenvalue search algorithm implemented in MC21 is also described. The foundations of this algorithm are a regula falsi search though several considerations are made in an effort to increase the efficiency of the algorithm for use with Monte Carlo. Specifically, criteria are developed to determine after each batch whether the Monte Carlo calculation should be continued, the search iteration can be rejected, or the search iteration has converged. These criteria seek to minimize the amount of time spent per iteration. Results for the regula falsi method are shown, illustrating that the method as implemented is indeed convergent and that the optimizations made ultimately reduce the total computational expense. (authors)

  7. Advancing MEMS Technology Usage through the MUMPS (Multi-User MEMS Processes) Program

    Science.gov (United States)

    Koester, D. A.; Markus, K. W.; Dhuler, V.; Mahadevan, R.; Cowen, A.

    1995-01-01

    In order to help provide access to advanced micro-electro-mechanical systems (MEMS) technologies and lower the barriers for both industry and academia, the Microelectronic Center of North Carolina (MCNC) and ARPA have developed a program which provides users with access to both MEMS processes and advanced electronic integration techniques. The four distinct aspects of this program, the multi-user MEMS processes (MUMP's), the consolidated micro-mechanical element library, smart MEMS, and the MEMS technology network are described in this paper. MUMP's is an ARPA-supported program created to provide inexpensive access to MEMS technology in a multi-user environment. It is both a proof-of-concept and educational tool that aids in the development of MEMS in the domestic community. MUMP's technologies currently include a 3-layer poly-silicon surface micromachining process and LIGA (lithography, electroforming, and injection molding) processes that provide reasonable design flexibility within set guidelines. The consolidated micromechanical element library (CaMEL) is a library of active and passive MEMS structures that can be downloaded by the MEMS community via the internet. Smart MEMS is the development of advanced electronics integration techniques for MEMS through the application of flip chip technology. The MEMS technology network (TechNet) is a menu of standard substrates and MEMS fabrication processes that can be purchased and combined to create unique process flows. TechNet provides the MEMS community greater flexibility and enhanced technology accessibility.

  8. MEMS based digital transform spectrometers

    Science.gov (United States)

    Geller, Yariv; Ramani, Mouli

    2005-09-01

    Earlier this year, a new breed of Spectrometers based on Micro-Electro-Mechanical-System (MEMS) engines has been introduced to the commercial market. The use of these engines combined with transform mathematics, produces powerful spectrometers at unprecedented low cost in various spectral regions.

  9. MEMS reliability: coming of age

    Science.gov (United States)

    Douglass, Michael R.

    2008-02-01

    In today's high-volume semiconductor world, one could easily take reliability for granted. As the MOEMS/MEMS industry continues to establish itself as a viable alternative to conventional manufacturing in the macro world, reliability can be of high concern. Currently, there are several emerging market opportunities in which MOEMS/MEMS is gaining a foothold. Markets such as mobile media, consumer electronics, biomedical devices, and homeland security are all showing great interest in microfabricated products. At the same time, these markets are among the most demanding when it comes to reliability assurance. To be successful, each company developing a MOEMS/MEMS device must consider reliability on an equal footing with cost, performance and manufacturability. What can this maturing industry learn from the successful development of DLP technology, air bag accelerometers and inkjet printheads? This paper discusses some basic reliability principles which any MOEMS/MEMS device development must use. Examples from the commercially successful and highly reliable Digital Micromirror Device complement the discussion.

  10. A Musical instrument in MEMS

    NARCIS (Netherlands)

    Engelen, Johannes Bernardus Charles; de Boer, Hans L.; de Boer, H.; Beekman, J.G.; Been, A.J.; Folkertsma, Gerrit Adriaan; Folkertsma, G.A.; Fortgens, L.; de Graaf, D.; Vocke, S.; Woldering, L.A.; Abelmann, Leon; Elwenspoek, Michael Curt

    In this work we describe a MEMS instrument that resonates at audible frequencies, and with which music can be made. The sounds are generated by mechanical resonators and capacitive displacement sensors. Damping by air scales unfavourably for generating audible frequencies with small devices.

  11. MEMS for Space Flight Applications

    Science.gov (United States)

    Lawton, R.

    1998-01-01

    Micro-Electrical Mechanical Systems (MEMS) are entering the stage of design and verification to demonstrate the utility of the technology for a wide range of applications including sensors and actuators for military, space, medical, industrial, consumer, automotive and instrumentation products.

  12. Carbon material based microelectromechanical system (MEMS): Fabrication and devices

    Science.gov (United States)

    Xu, Wenjun

    silicon and metal based microsystems. In this thesis, this mature technique was exploited to generate a variety of microelectrode structures to facilitate the micropatterning and manipulation of the CNTs. Selective deposition of electrically charged CNTs onto desired locations was realized in an EPD process through patterning of electric field lines created by the microelectrodes fabricated through MEMS techniques. A variety of 2-D and 3-D micropatterns of CNTs with waferscale areas have been successfully achieved in both rigid and elastic systems. The thickness and morphology of the generated CNT patterns was found to be readily controllable through the parameters of the fabrication process. Studies also showed that for this technique, high surface hydrophobicity of the non-conductive regions in microstructures was critical to accomplish well-defined selective micropatterning of CNTs. Upon clearing the hurdles of the CNT manipulation, a patterned PDMS/CNT nanocomposite was fabricated through the aforementioned approach and was incorporated, investigated and validated in elastic force/strain microsensors. The gauge factor of the sensor exhibited a strong dependence on both the initial resistance of the device and the applied strain. Detailed analysis of the data suggests that the piezoresistive effect of this specially constructed bi-layer composite could be due to three mechanisms, and the sensing mechanism may vary when physical properties of the CNT network embedded in the polymer matrix alter. The feasibility of the PDSM/CNT composite being utilized as an elastic electret was further explored. The nanocomposite composed of these two non-traditional electret materials exhibited electret characteristics with reasonable charge storage stability when charged using a corona discharge. The power generation capacity of the corona-charged composite has been characterized and successfully demonstrated in both a ball drop experiment and cyclic mechanical load experiments

  13. Electrochemical measurements on a droplet using gold microelectrodes

    Science.gov (United States)

    Jenabi, Amin; Souri, Asma; Rastkhadiv, Ali

    2016-03-01

    Facile methods of ion recognition are important for the fabrication of electronic tongue systems. In this work, we demonstrate performing pulsed conductometry on microliter electrolyte droplets dropped on gold microelectrodes vapor deposited on soda lime glass slides. A droplet is dropped between two microelectrodes when a voltage waveform from a preprogramed power supply is applied on them. The temporal variation of the electric current passing through the droplet is recorded, digitized and stored. The obtained data are compared with the database formed out of the previous experiences for the classification of the sample electrolytes. It is shown that the shape of the voltage waveform is the important parameter of the process. We devised a method for the optimization of the voltage waveform profile for obtaining the maximum of discriminating information from the recorded current variations.

  14. Electrochemical measurements on a droplet using gold microelectrodes

    International Nuclear Information System (INIS)

    Jenabi, Amin; Souri, Asma; Rastkhadiv, Ali

    2016-01-01

    Facile methods of ion recognition are important for the fabrication of electronic tongue systems. In this work, we demonstrate performing pulsed conductometry on microliter electrolyte droplets dropped on gold microelectrodes vapor deposited on soda lime glass slides. A droplet is dropped between two microelectrodes when a voltage waveform from a preprogramed power supply is applied on them. The temporal variation of the electric current passing through the droplet is recorded, digitized and stored. The obtained data are compared with the database formed out of the previous experiences for the classification of the sample electrolytes. It is shown that the shape of the voltage waveform is the important parameter of the process. We devised a method for the optimization of the voltage waveform profile for obtaining the maximum of discriminating information from the recorded current variations. (paper)

  15. Stretchable microelectrode array using room-temperature liquid alloy interconnects

    International Nuclear Information System (INIS)

    Wei, P; Ziaie, B; Taylor, R; Chung, C; Higgs, G; Pruitt, B L; Ding, Z; Abilez, O J

    2011-01-01

    In this paper, we present a stretchable microelectrode array for studying cell behavior under mechanical strain. The electrode array consists of gold-plated nail-head pins (250 µm tip diameter) or tungsten micro-wires (25.4 µm in diameter) inserted into a polydimethylsiloxane (PDMS) platform (25.4 × 25.4 mm 2 ). Stretchable interconnects to the outside were provided by fusible indium-alloy-filled microchannels. The alloy is liquid at room temperature, thus providing the necessary stretchability and electrical conductivity. The electrode platform can withstand strains of up to 40% and repeated (100 times) strains of up to 35% did not cause any failure in the electrodes or the PDMS substrate. We confirmed biocompatibility of short-term culture, and using the gold pin device, we demonstrated electric field pacing of adult murine heart cells. Further, using the tungsten microelectrode device, we successfully measured depolarizations of differentiated murine heart cells from embryoid body clusters

  16. Comparison of microelectrode sensing configurations for impedimetric cell monitoring

    DEFF Research Database (Denmark)

    Caviglia, Claudia; Heiskanen, Arto; Andresen, Thomas Lars

    2012-01-01

    interdigitated microelectrodes using a versatile custom-made monitoring platform including a 24-channel miniaturized potentiostat. As expected, characterization of bare microelectrodes in buffer and tracking experiments with HeLa cells over 16 hours demonstrate that the coplanar configuration provides a higher......A theoretical and experimental comparison between vertical and coplanar interdigitated sensing configurations for impedimetric cell growth tracking is presented. For the first time, these widely-adopted approaches are quantitatively compared on the same cell populations and on the same 10μm...... sensitivity to cell adhesion and spreading (Cell Index = 1.6 vs. 0.4) albeit at a higher frequency of maximum sensitivity (100kHz vs. 24 kHz)....

  17. Chronic in vivo stability assessment of carbon fiber microelectrode arrays

    Science.gov (United States)

    Patel, Paras R.; Zhang, Huanan; Robbins, Matthew T.; Nofar, Justin B.; Marshall, Shaun P.; Kobylarek, Michael J.; Kozai, Takashi D. Y.; Kotov, Nicholas A.; Chestek, Cynthia A.

    2016-12-01

    Objective. Individual carbon fiber microelectrodes can record unit activity in both acute and semi-chronic (∼1 month) implants. Additionally, new methods have been developed to insert a 16 channel array of carbon fiber microelectrodes. Before assessing the in vivo long-term viability of these arrays, accelerated soak tests were carried out to determine the most stable site coating material. Next, a multi-animal, multi-month, chronic implantation study was carried out with carbon fiber microelectrode arrays and silicon electrodes. Approach. Carbon fibers were first functionalized with one of two different formulations of PEDOT and subjected to accelerated aging in a heated water bath. After determining the best PEDOT formula to use, carbon fiber arrays were chronically implanted in rat motor cortex. Some rodents were also implanted with a single silicon electrode, while others received both. At the end of the study a subset of animals were perfused and the brain tissue sliced. Tissue sections were stained for astrocytes, microglia, and neurons. The local reactive responses were assessed using qualitative and quantitative methods. Main results. Electrophysiology recordings showed the carbon fibers detecting unit activity for at least 3 months with average amplitudes of ∼200 μV. Histology analysis showed the carbon fiber arrays with a minimal to non-existent glial scarring response with no adverse effects on neuronal density. Silicon electrodes showed large glial scarring that impacted neuronal counts. Significance. This study has validated the use of carbon fiber microelectrode arrays as a chronic neural recording technology. These electrodes have demonstrated the ability to detect single units with high amplitude over 3 months, and show the potential to record for even longer periods. In addition, the minimal reactive response should hold stable indefinitely, as any response by the immune system may reach a steady state after 12 weeks.

  18. Simultaneous recording of brain extracellular glucose, spike and local field potential in real time using an implantable microelectrode array with nano-materials

    Science.gov (United States)

    Wei, Wenjing; Song, Yilin; Fan, Xinyi; Zhang, Song; Wang, Li; Xu, Shengwei; Wang, Mixia; Cai, Xinxia

    2016-03-01

    Glucose is the main substrate for neurons in the central nervous system. In order to efficiently characterize the brain glucose mechanism, it is desirable to determine the extracellular glucose dynamics as well as the corresponding neuroelectrical activity in vivo. In the present study, we fabricated an implantable microelectrode array (MEA) probe composed of platinum electrochemical and electrophysiology microelectrodes by standard micro electromechanical system (MEMS) processes. The MEA probe was modified with nano-materials and implanted in a urethane-anesthetized rat for simultaneous recording of striatal extracellular glucose, local field potential (LFP) and spike on the same spatiotemporal scale when the rat was in normoglycemia, hypoglycemia and hyperglycemia. During these dual-mode recordings, we observed that increase of extracellular glucose enhanced the LFP power and spike firing rate, while decrease of glucose had an opposite effect. This dual mode MEA probe is capable of examining specific spatiotemporal relationships between electrical and chemical signaling in the brain, which will contribute significantly to improve our understanding of the neuron physiology.

  19. Simultaneous recording of brain extracellular glucose, spike and local field potential in real time using an implantable microelectrode array with nano-materials

    International Nuclear Information System (INIS)

    Wei, Wenjing; Song, Yilin; Fan, Xinyi; Zhang, Song; Wang, Li; Xu, Shengwei; Wang, Mixia; Cai, Xinxia

    2016-01-01

    Glucose is the main substrate for neurons in the central nervous system. In order to efficiently characterize the brain glucose mechanism, it is desirable to determine the extracellular glucose dynamics as well as the corresponding neuroelectrical activity in vivo. In the present study, we fabricated an implantable microelectrode array (MEA) probe composed of platinum electrochemical and electrophysiology microelectrodes by standard micro electromechanical system (MEMS) processes. The MEA probe was modified with nano-materials and implanted in a urethane-anesthetized rat for simultaneous recording of striatal extracellular glucose, local field potential (LFP) and spike on the same spatiotemporal scale when the rat was in normoglycemia, hypoglycemia and hyperglycemia. During these dual-mode recordings, we observed that increase of extracellular glucose enhanced the LFP power and spike firing rate, while decrease of glucose had an opposite effect. This dual mode MEA probe is capable of examining specific spatiotemporal relationships between electrical and chemical signaling in the brain, which will contribute significantly to improve our understanding of the neuron physiology. (paper)

  20. Pencil lead microelectrode and the application on cell dielectrophoresis

    Energy Technology Data Exchange (ETDEWEB)

    Hsieh, Bo-Chuan; Cheng, Tzong-Jih; Shih, Syuan-He [Department of Bio-Industrial Mechatronics Engineering, National Taiwan University, 136 Chou-Shan Rd., Taipei City 106, Taiwan (China); Chen, Richie L.C., E-mail: rlcchen@ntu.edu.tw [Department of Bio-Industrial Mechatronics Engineering, National Taiwan University, 136 Chou-Shan Rd., Taipei City 106, Taiwan (China)

    2011-11-30

    A microelectrode was fabricated by electrochemical etching of a pencil lead (0.5 mm in diameter) in 1.0 M NaOH aqueous solution. The pencil lead was dipped into the solution and then an ac voltage (3.0 V{sub rms} for 10 min) was imposed against a stainless plate under mild stirring (450 rpm). The electrochemically sharpened pencil tip was about 10 {mu}m in diameter (12 {+-} 3 {mu}m, n = 5), and the lateral part was insulated within a polypropylene micro-pipette tip (2-200 {mu}L volume range). The cyclic voltammograms conducted in 2.0 mM ferricyanide/ferrocyanide buffer solution (pH 7.0) are with low capacitive current and a typical sigmoidal signal of micro-sized electrodes. The microelectrode was used to perform dielectrophoresis of polystyrene latex microbeads (nominal diameter of 3 {mu}m) and human red blood cells. A conducting glass (indium tin oxide coated glass, 40 mm x 40 mm x 1 mm) served as the counter electrode (0.5 mm beneath the microelectrode) to generate the asymmetrical electric field and also as the window for microscopic observation. With the sinusoidal bias voltage (30 V{sub rms}) ranged from 20 Hz to 2 MHz, positive and negative dielectrophoretic phenomena were identified.

  1. Amorphous Diamond MEMS and Sensors

    Energy Technology Data Exchange (ETDEWEB)

    SULLIVAN, JOHN P.; FRIEDMANN, THOMAS A.; ASHBY, CAROL I.; DE BOER, MAARTEN P.; SCHUBERT, W. KENT; SHUL, RANDY J.; HOHLFELDER, ROBERT J.; LAVAN, D.A.

    2002-06-01

    This report describes a new microsystems technology for the creation of microsensors and microelectromechanical systems (MEMS) using stress-free amorphous diamond (aD) films. Stress-free aD is a new material that has mechanical properties close to that of crystalline diamond, and the material is particularly promising for the development of high sensitivity microsensors and rugged and reliable MEMS. Some of the unique properties of aD include the ability to easily tailor film stress from compressive to slightly tensile, hardness and stiffness 80-90% that of crystalline diamond, very high wear resistance, a hydrophobic surface, extreme chemical inertness, chemical compatibility with silicon, controllable electrical conductivity from insulating to conducting, and biocompatibility. A variety of MEMS structures were fabricated from this material and evaluated. These structures included electrostatically-actuated comb drives, micro-tensile test structures, singly- and doubly-clamped beams, and friction and wear test structures. It was found that surface micromachined MEMS could be fabricated in this material easily and that the hydrophobic surface of the film enabled the release of structures without the need for special drying procedures or the use of applied hydrophobic coatings. Measurements using these structures revealed that aD has a Young's modulus of {approx}650 GPa, a tensile fracture strength of 8 GPa, and a fracture toughness of 8 MPa{center_dot}m {sup 1/2}. These results suggest that this material may be suitable in applications where stiction or wear is an issue. Flexural plate wave (FPW) microsensors were also fabricated from aD. These devices use membranes of aD as thin as {approx}100 nm. The performance of the aD FPW sensors was evaluated for the detection of volatile organic compounds using ethyl cellulose as the sensor coating. For comparable membrane thicknesses, the aD sensors showed better performance than silicon nitride based sensors. Greater

  2. A Widely-Accessible Distributed MEMS Processing Environment. The MEMS Exchange Program

    Science.gov (United States)

    2012-10-29

    all of these patterns in advance, we made a new cost model, called the Python Code cost model, which utilizes the power of a high level programming ...document entitled “The Beginners Guide to MEMS Processing” on the MEMSNet and MEMS Exchange The MEMS Exchange Program Final Technical Report October 29...from the Government is absolutely necessary. As said The MEMS Exchange Program Final Technical Report October 29, 2012 Page 57 of 58 before

  3. Miniaturized GPS/MEMS IMU integrated board

    Science.gov (United States)

    Lin, Ching-Fang (Inventor)

    2012-01-01

    This invention documents the efforts on the research and development of a miniaturized GPS/MEMS IMU integrated navigation system. A miniaturized GPS/MEMS IMU integrated navigation system is presented; Laser Dynamic Range Imager (LDRI) based alignment algorithm for space applications is discussed. Two navigation cameras are also included to measure the range and range rate which can be integrated into the GPS/MEMS IMU system to enhance the navigation solution.

  4. Carbon Nanotube-based microelectrodes for enhanced detection of neurotransmitters

    Science.gov (United States)

    Jacobs, Christopher B.

    Fast-scan cyclic voltammetry (FSCV) is one of the common techniques used for rapid measurement of neurotransmitters in vivo. Carbon-fiber microelectrodes (CFMEs) are typically used for neurotransmitter detection because of sub-second measurement capabilities, ability to measure changes in neurotransmitter concentration during neurotransmission, and the small size electrode diameter, which limits the amount of damage caused to tissue. Cylinder CFMEs, typically 50 -- 100 microm long, are commonly used for in vivo experiments because the electrode sensitivity is directly related to the electrode surface area. However the length of the electrode can limit the spatial resolution of neurotransmitter detection, which can restrict experiments in Drosophila and other small model systems. In addition, the electrode sensitivity toward dopamine and serotonin detection drops significantly for measurements at rates faster than 10 Hz, limiting the temporal resolution of CFMEs. While the use of FSCV at carbon-fiber microelectrodes has led to substantial strides in our understanding of neurotransmission, techniques that expand the capabilities of CFMEs are crucial to fully maximize the potential uses of FSCV. This dissertation introduces new methods to integrate carbon nanotubes (CNT) into microelectrodes and discusses the electrochemical enhancements of these CNT-microelectrodes. The electrodes are specifically designed with simple fabrication procedures so that highly specialized equipment is not necessary, and they utilize commercially available materials so that the electrodes could be easily integrated into existing systems. The electrochemical properties of CNT modified CFMEs are characterized using FSCV and the effect of CNT functionalization on these properties is explored in Chapter 2. For example, CFME modification using carboxylic acid functionalized CNTs yield about a 6-fold increase in dopamine oxidation current, but modification with octadecylamine CNTs results in a

  5. Wafer level packaging of MEMS

    International Nuclear Information System (INIS)

    Esashi, Masayoshi

    2008-01-01

    Wafer level packaging plays many important roles for MEMS (micro electro mechanical systems), including cost, yield and reliability. MEMS structures on silicon chips are encapsulated between bonded wafers or by surface micromachining, and electrical interconnections are made from the cavity. Bonding at the interface, such as glass–Si anodic bonding and metal-to-metal bonding, requires electrical interconnection through the lid vias in many cases. On the other hand, lateral electrical interconnections on the surface of the chip are used for bonding with intermediate melting materials, such as low melting point glass and solder. The cavity formed by surface micromachining is made using sacrificial etching, and the openings needed for the sacrificial etching are plugged using deposition sealing methods. Vacuum packaging methods and the structures for electrical feedthrough for the interconnection are discussed in this review. (topical review)

  6. MEMS Bragg grating force sensor

    DEFF Research Database (Denmark)

    Reck, Kasper; Thomsen, Erik Vilain; Hansen, Ole

    2011-01-01

    We present modeling, design, fabrication and characterization of a new type of all-optical frequency modulated MEMS force sensor based on a mechanically amplified double clamped waveguide beam structure with integrated Bragg grating. The sensor is ideally suited for force measurements in harsh...... environments and for remote and distributed sensing and has a measured sensitivity of -14 nm/N, which is several times higher than what is obtained in conventional fiber Bragg grating force sensors. © 2011 Optical Society of America....

  7. MEMS Stirling Cooler Development Update

    Science.gov (United States)

    Moran, Matthew E.; Wesolek, Danielle

    2003-01-01

    This presentation provides an update on the effort to build and test a prototype unit of the patented MEMS Stirling cooler concept. A micro-scale regenerator has been fabricated by Polar Thermal Technologies and is currently being integrated into a Stirling cycle simulator at Johns Hopkins University Applied Physics Laboratory. A discussion of the analysis, design, assembly, and test plans for the prototype will be presented.

  8. Surface chemistry and tribology of MEMS.

    Science.gov (United States)

    Maboudian, Roya; Carraro, Carlo

    2004-01-01

    The microscopic length scale and high surface-to-volume ratio, characteristic of microelectro-mechanical systems (MEMS), dictate that surface properties are of paramount importance. This review deals with the effects of surface chemical treatments on tribological properties (adhesion, friction, and wear) of MEMS devices. After a brief review of materials and processes that are utilized in MEMS technology, the relevant tribological and chemical issues are discussed. Various MEMS microinstruments are discussed, which are commonly employed to perform adhesion, friction, and wear measurements. The effects of different surface treatments on the reported tribological properties are discussed.

  9. Theoretical and experimental study of the bending influence on the capacitance of interdigitated micro-electrodes patterned on flexible substrates

    International Nuclear Information System (INIS)

    Molina-Lopez, F.; Briand, D.; Rooij, N. F. de; Kinkeldei, T.; Tröster, G.

    2013-01-01

    Interdigitated electrodes are common structures in the fields of microelectronics and MEMS. Recent developments in flexible electronics compel an understanding of such structures under bending constraints. In this work, the behavior of interdigitated micro-electrodes when subjected to circular bending has been theoretically and experimentally studied through changes in capacitance. An analytical model has been developed to calculate the expected variation in capacitance of such structures while undergoing outward and inward bending along the direction perpendicular to the electrodes. The model combines conformal mapping techniques to account for the electric field redistribution and fundamental aspects of solid mechanics in order to define the geometrical deformation of the electrodes while bending. To experimentally verify our theoretical predictions, several interdigitated electrode structures with different geometries were fabricated on polymeric substrates by means of photolithography. The samples, placed in a customized bending setup, were bent to controlled radii of curvature while measuring their capacitance. A maximum variation in capacitance of less than 3% was observed at a minimum radius of curvature of 2.5 mm for all the devices tested with very thin electrodes whereas changes of up to 7% were found on stiffer, plated electrodes. Larger or smaller variations would be possible, in theory, by adjusting the geometry of the device. This work establishes a useful predictive tool for the design and evaluation of truly flexible/bendable electronics consisting of interdigitated structures, allowing one to tune the bending influence on the capacitance value through geometrical design

  10. Silicon Wafer-Based Platinum Microelectrode Array Biosensor for Near Real-Time Measurement of Glutamate in Vivo

    Directory of Open Access Journals (Sweden)

    Nigel T. Maidment

    2008-08-01

    Full Text Available Using Micro-Electro-Mechanical-Systems (MEMS technologies, we have developed silicon wafer-based platinum microelectrode arrays (MEAs modified with glutamate oxidase (GluOx for electroenzymatic detection of glutamate in vivo. These MEAs were designed to have optimal spatial resolution for in vivo recordings. Selective detection of glutamate in the presence of the electroactive interferents, dopamine and ascorbic acid, was attained by deposition of polypyrrole and Nafion. The sensors responded to glutamate with a limit of detection under 1μM and a sub-1-second response time in solution. In addition to extensive in vitro characterization, the utility of these MEA glutamate biosensors was also established in vivo. In the anesthetized rat, these MEA glutamate biosensors were used for detection of cortically-evoked glutamate release in the ventral striatum. The MEA biosensors also were applied to the detection of stress-induced glutamate release in the dorsal striatum of the freely-moving rat.

  11. Challenges in the Packaging of MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Malshe, A.P.; Singh, S.B.; Eaton, W.P.; O' Neal, C.; Brown, W.D.; Miller, W.M.

    1999-03-26

    The packaging of Micro-Electro-Mechanical Systems (MEMS) is a field of great importance to anyone using or manufacturing sensors, consumer products, or military applications. Currently much work has been done in the design and fabrication of MEMS devices but insufficient research and few publications have been completed on the packaging of these devices. This is despite the fact that packaging is a very large percentage of the total cost of MEMS devices. The main difference between IC packaging and MEMS packaging is that MEMS packaging is almost always application specific and greatly affected by its environment and packaging techniques such as die handling, die attach processes, and lid sealing. Many of these aspects are directly related to the materials used in the packaging processes. MEMS devices that are functional in wafer form can be rendered inoperable after packaging. MEMS dies must be handled only from the chip sides so features on the top surface are not damaged. This eliminates most current die pick-and-place fixtures. Die attach materials are key to MEMS packaging. Using hard die attach solders can create high stresses in the MEMS devices, which can affect their operation greatly. Low-stress epoxies can be high-outgassing, which can also affect device performance. Also, a low modulus die attach can allow the die to move during ultrasonic wirebonding resulting to low wirebond strength. Another source of residual stress is the lid sealing process. Most MEMS based sensors and devices require a hermetically sealed package. This can be done by parallel seam welding the package lid, but at the cost of further induced stress on the die. Another issue of MEMS packaging is the media compatibility of the packaged device. MEMS unlike ICS often interface with their environment, which could be high pressure or corrosive. The main conclusion we can draw about MEMS packaging is that the package affects the performance and reliability of the MEMS devices. There is a

  12. Nanoporous gold microelectrode prepared from potential modulated electrochemical alloying–dealloying in ionic liquid

    International Nuclear Information System (INIS)

    Jiang, Junhua; Wang, Xinying; Zhang, Lei

    2013-01-01

    Highlights: • A green chemistry method for producing nanoporous gold microelectrode was studied. • An ionic liquid plating bath was utilized for electrochemical alloying–dealloying. • Nanostructures of gold surface layers can be tuned by modulating potential. • Nanoporous gold microelectrode has high surface area and merit of a microelectrode. • Nitrite oxidation and reduction on nanoporous gold microelectrode were studied. -- Abstract: Nanoporous gold (NPG) microelectrodes with high surface area and open pore network were successfully prepared by applying modulated potential to a polycrystalline Au-disk microelectrode in ionic liquid electrolyte containing ZnCl 2 at elevated temperature. During cathodic process, Zn is electrodeposited and interacted with Au microdisk substrate to form a AuZn alloy phase. During subsequent anodic process, Zn is selectively dissolved from the alloy phase, leading to the formation of a NPG layer which can grow with repetitive potential modulation. Scanning-electron microscope and energy dispersive X-ray microscope measurements show that the NPG microelectrodes possessing nanoporous structures can be tuned via potential modulation, and chemically contain a small amount of Zn whose presence has no obvious influence on electrochemical responses of the electrodes. Steady-state and cyclic voltammetric studies suggest that the NPG microelectrodes have high surface area and keep diffusional properties of a microelectrode. Electrochemical nitrite reduction and oxidation are studied as model reactions to demonstrate potential applications of the NPG microelectrodes in electrocatalysis and electroanalysis. These facts suggest that the potential-modulated electrochemical alloying/dealloying in ionic liquid electrolyte offers a convenient green-chemistry method for the preparation of nanoporous microelectrodes

  13. A Teaching - Learning Framework for MEMS Education

    International Nuclear Information System (INIS)

    Sheeparamatti, B G; Angadi, S A; Sheeparamatti, R B; Kadadevaramath, J S

    2006-01-01

    Micro-Electro-Mechanical Systems (MEMS) technology has been identified as one of the most promising technologies in the 21st century. MEMS technology has opened up a wide array of unforeseen applications. Hence it is necessary to train the technocrats of tomorrow in this emerging field to meet the industrial/societal demands. The drive behind fostering of MEMS technology is the reduction in the cost, size, weight, and power consumption of the sensors, actuators, and associated electronics. MEMS is a multidisciplinary engineering and basic science area which includes electrical engineering, mechanical engineering, material science and biomedical engineering. Hence MEMS education needs a special approach to prepare the technocrats for a career in MEMS. The modern education methodology using computer based training systems (CBTS) with embedded modeling and simulation tools will help in this direction. The availability of computer based learning resources such as MATLAB, ANSYS/Multiphysics and rapid prototyping tools have contributed to proposition of an efficient teaching-learning framework for MEMS education presented in this paper. This paper proposes a conceptual framework for teaching/learning MEMS in the current technical education scenario

  14. Wavelength tunable MEMS VCSELs for OCT imaging

    DEFF Research Database (Denmark)

    Sahoo, Hitesh Kumar; Ansbæk, Thor; Ottaviano, Luisa

    2018-01-01

    MEMS VCSELs are one of the most promising swept source (SS) lasers for optical coherence tomography (OCT) and one of the best candidates for future integration with endoscopes, surgical probes and achieving an integrated OCT system. However, the current MEMS-based SS are processed on the III...

  15. Evolution of a MEMS Photoacoustic Chemical Sensor

    National Research Council Canada - National Science Library

    Pellegrino, Paul M; Polcawich, Ronald G

    2003-01-01

    .... Initial MEMS work is centered on fabrication of a lead zirconate titanate (PZT) microphone subsystem to be incorporated in the full photoacoustic device. Preliminary results were very positive for the macro-photoacoustic cell, PZT membrane microphones design / fabrication and elementary monolithic MEMS photoacoustic cavity.

  16. MEMS-Based Waste Vibrational Energy Harvesters

    Science.gov (United States)

    2013-06-01

    MEMS energy- harvesting device. Although PZT is used more prevalently due to its higher piezoelectric coefficient and dielectric constant, AlN has...7 1. Lead Zirconium Titanate ( PZT ) .........................................................7 2. Aluminum...Laboratory PiezoMUMPS Piezoelectric Multi-User MEMS Processes PZT Lead Zirconate Titanate SEM Scanning Electron Microscopy SiO2 Silicon

  17. The Micronium-A Musical MEMS instrument

    NARCIS (Netherlands)

    Engelen, Johannes Bernardus Charles; de Boer, Hans L.; de Boer, Hylco; Beekman, Jethro G.; Fortgens, Laurens C.; de Graaf, Derk B.; Vocke, Sander; Abelmann, Leon

    The Micronium is a musical instrument fabricated from silicon using microelectromechanical system (MEMS) technology. It is—to the best of our knowledge—the first musical micro-instrument fabricated using MEMS technology, where the actual sound is generated by mechanical microstructures. The

  18. Design and fabrication of a MEMS chevron-type thermal actuator

    Energy Technology Data Exchange (ETDEWEB)

    Baracu, Angela, E-mail: angela.baracu@imt.ro [Laboratory of Modeling, Simulation and CAD, National Institute for R and D in Microtechnologies - IMT Bucharest, 126A, Erou Iancu Nicolae Street, 077190, Bucharest, Romania and University Politehnica of Bucharest (Romania); Voicu, Rodica; Müller, Raluca; Avram, Andrei [Laboratory of Modeling, Simulation and CAD, National Institute for R and D in Microtechnologies - IMT Bucharest, 126A, Erou Iancu Nicolae Street, 077190, Bucharest (Romania); Pustan, Marius, E-mail: marius.pustan@omt.utcluj.ro; Chiorean, Radu, E-mail: marius.pustan@omt.utcluj.ro; Birleanu, Corina, E-mail: marius.pustan@omt.utcluj.ro; Dudescu, Cristian, E-mail: marius.pustan@omt.utcluj.ro [Laboratory of Micro and Nano Systems, Technical University of Cluj-Napoca, Bd. Muncii, no. 103-105, 400641 Cluj-Napoca (Romania)

    2015-02-17

    This paper presents the design and fabrication of a MEMS chevron-type thermal actuator. The device was designed for fabrication in the standard MEMS technology, where the topography of the upper layers depends on the patterns of structural and sacrificial layers underneath. The proposed actuator presents some advantages over usual thermal vertical chevron actuators by means of low operating voltages, high output force and linear movement without deformation of the shaft. The device simulations were done using COVENTOR software. The movement obtained by simulation was 12 μm, for a voltage of 0.2 V and the current intensity of 257 mA. The design optimizes the in-plane displacement by fixed anchors and beam inclination angle. Heating is provided by Joule dissipation. The material used for manufacture of chevron-based actuator was aluminum due to its thermal and mechanical properties. The release of the movable part was performed using isotropic dry etching by Reactive Ion Etching (RIE). A first inspection was achieved using Scanning Electron Microscope (SEM). In order to obtain the in-plane displacement we carried out electrical measurements. The thermal actuator can be used for a variety of optical and microassembling applications. This kind of thermal actuator could be integrated easily with other micro devices since its fabrication is compatible with the general semiconductor processes.

  19. Output-Feedback Control of a Chaotic MEMS Resonator for Oscillation Amplitude Enhancement

    Directory of Open Access Journals (Sweden)

    Alexander Jimenez-Triana

    2014-01-01

    Full Text Available The present work addresses the problem of chaos control in an electrostatic MEMS resonator by using an output-feedback control scheme. One of the unstable orbits immersed in the chaotic attractor is stabilized in order to produce a sustained oscillation of the movable plate composing the microstructure. The orbit is carefully chosen so as to produce a high amplitude oscillation. This approach allows the enhancement of oscillation amplitude of the resonator at a reduced control effort, since the unstable orbit already exists in the system and it is not necessary to spend energy to create it. Realistic operational conditions of the MEMS are considered including parametric uncertainties in the model and constraints due to the difficulty in measuring the speed of the plates of the microstructure. A control law is constructed recursively by using the technique of backstepping. Finally, numerical simulations are carried out to confirm the validity of the developed control scheme and to demonstrate the effect of controlling orbits immersed in the chaotic attractor.

  20. Optical MEMS for Earth observation

    Science.gov (United States)

    Liotard, Arnaud; Viard, Thierry; Noell, Wilfried; Zamkotsian, Frédéric; Freire, Marco; Guldimann, Benedikt; Kraft, Stefan

    2017-11-01

    Due to the relatively large number of optical Earth Observation missions at ESA, this area is interesting for new space technology developments. In addition to their compactness, scalability and specific task customization, optical MEMS could generate new functions not available with current technologies and are thus candidates for the design of future space instruments. Most mature components for space applications are the digital mirror arrays, the micro-deformable mirrors, the programmable micro diffraction gratings and tiltable micromirrors. A first selection of market-pull and techno-push concepts is done. In addition, some concepts are coming from outside Earth Observation. Finally two concepts are more deeply analyzed. The first concept is a programmable slit for straylight control for space spectro-imagers. This instrument is a push-broom spectroimager for which some images cannot be exploited because of bright sources in the field-of-view. The proposed concept consists in replacing the current entrance spectrometer slit by an active row of micro-mirrors. The MEMS will permit to dynamically remove the bright sources and then to obtain a field-of-view with an optically enhanced signal-to-noise ratio. The second concept is a push-broom imager for which the acquired spectrum can be tuned by optical MEMS. This system is composed of two diffractive elements and a digital mirror array. The first diffractive element spreads the spectrum. A micromirror array is set at the location of the spectral focal plane. By putting the micro-mirrors ON or OFF, we can select parts of field-of-view or spectrum. The second diffractive element then recombines the light on a push-broom detector. Dichroics filters, strip filter, band-pass filter could be replaced by a unique instrument.

  1. Design and Research of the Movable Hybrid Photovoltaic-Thermal (PVT System

    Directory of Open Access Journals (Sweden)

    Lian Zhang

    2017-04-01

    Full Text Available In recent years, with the development of photovoltaic system and photo-thermal system technology, hybrid photovoltaic-thermal (PVT technology has been a breakthrough in many aspects. This paper describes the movable hybrid PVT system from the aspects of appearance structure, energy flow, and control circuit. The system is equipped with rolling wheels and the simulated light sources also can be removed so that the system can be used in the outdoor conditions. The movable system is also suitable for the PVT system and its related applications without any external power supply. This system combines two technologies: photovoltaic power generation and photo-thermal utilization. The first part of the power supply is for the systems own output power supply, and the second part is for generating thermal energy. The two separate parts can be controlled and monitored respectively through the control circuits and the touch screens. The experimental results show that the system can generate 691 kWh electric energy and 3047.8 kWh thermal energy each year under normal working conditions. The efficiency of the proposed movable hybrid PVT system is calculated to be approximately 42.82% using the revised equations that are proposed in this paper. Therefore, the movable hybrid PVT system can meet the daily demands of hot water and electricity power in remote areas or islands and other non-grid areas. It also can be used to conduct experiment tests for the PVT system.

  2. Analysis of Heat Stress and the Indoor Climate Control Requirements for Movable Refuge Chambers.

    Science.gov (United States)

    Hao, Xiaoli; Guo, Chenxin; Lin, Yaolin; Wang, Haiqiao; Liu, Heqing

    2016-05-20

    Movable refuge chambers are a new kind of rescue device for underground mining, which is believed to have a potential positive impact on reducing the rate of fatalities. It is likely to be hot and humid inside a movable refuge chamber due to the metabolism of trapped miners, heat generated by equipment and heat transferred from outside. To investigate the heat stress experienced by miners trapped in a movable refuge chamber, the predicted heat strain (PHS) model was used to simulate the heat transfer process between the person and the thermal environment. The variations of heat stress with the temperature and humidity inside the refuge chamber were analyzed. The effects of air temperature outside the refuge chamber and the overall heat transfer coefficient of the refuge chamber shell on the heat stress inside the refuge chamber was also investigated. The relationship between the limit of exposure duration and the air temperature and humidity was numerically analyzed to determine the upper limits of temperature and humidity inside a refuge chamber. Air temperature of 32 °C and relative humidity of 70% are recommended as the design standard for internal thermal environment control of movable refuge chambers.

  3. Quantum theory of shuttling instability in a movable quantum dot array

    DEFF Research Database (Denmark)

    Donarini, Andrea; Novotny, Tomas; Jauho, Antti-Pekka

    2004-01-01

    We study the shuttling instability in an array of three quantum dots the central one of which is movable. We extend the results by Armour and MacKinnon on this problem to a broader parameter regime. The results obtained by an efficient numerical method are interpreted directly using the Wigner...

  4. Spatial variability of the wave bottom boundary layer over movable rippled beds

    NARCIS (Netherlands)

    Rodriguez-Abudo, S.; Foster, D.L.; Henriquez, M.

    2013-01-01

    Observations of the spatially dependent velocity field over movable bed forms subjected to slightly skewed and asymmetric regular wave forcing were collected. The dynamics between the ripple elements is dominated by coherent vortices, characterized by the swirling strength, and evidenced in the

  5. Analysis of Heat Stress and the Indoor Climate Control Requirements for Movable Refuge Chambers

    Directory of Open Access Journals (Sweden)

    Xiaoli Hao

    2016-05-01

    Full Text Available Movable refuge chambers are a new kind of rescue device for underground mining, which is believed to have a potential positive impact on reducing the rate of fatalities. It is likely to be hot and humid inside a movable refuge chamber due to the metabolism of trapped miners, heat generated by equipment and heat transferred from outside. To investigate the heat stress experienced by miners trapped in a movable refuge chamber, the predicted heat strain (PHS model was used to simulate the heat transfer process between the person and the thermal environment. The variations of heat stress with the temperature and humidity inside the refuge chamber were analyzed. The effects of air temperature outside the refuge chamber and the overall heat transfer coefficient of the refuge chamber shell on the heat stress inside the refuge chamber was also investigated. The relationship between the limit of exposure duration and the air temperature and humidity was numerically analyzed to determine the upper limits of temperature and humidity inside a refuge chamber. Air temperature of 32 °C and relative humidity of 70% are recommended as the design standard for internal thermal environment control of movable refuge chambers.

  6. 78 FR 13747 - Safety Advisory 2013-01; Passing Stop Signals Protecting Movable Bridges

    Science.gov (United States)

    2013-02-28

    ... Association Manual for Railway Engineering. 2. Evaluate operating rules and procedures that permit the...: (1) Evaluate the design and construction of existing movable bridges to determine if effective span... perform these duties. FOR FURTHER INFORMATION CONTACT: Carlo M. Patrick, Staff Director, Rail and...

  7. MEMS fundamental technology and applications

    CERN Document Server

    Choudhary, Vikas

    2013-01-01

    "The book editors have managed to assemble a group of extraordinary authors to provide their expertise to this book. While giving an excellent overview of the history and the state of the art of MEMS technology, this book also focuses on current trends and topics such as gyroscopes that currently experience significant and increasing popularity in research and in industry. It is well written and the material is presented in a well-structured way making it easily accessible to any reader with a technical background."-Boris Stoeber, The University of British Columbia, Vancouver, Canada.

  8. Development of MEMS photoacoustic spectroscopy

    Energy Technology Data Exchange (ETDEWEB)

    Robinson, Alex Lockwood; Eichenfield, Matthew S.; Griffin, Benjamin; Harvey, Heidi Alyssa; Nielson, Gregory N.; Okandan, Murat; Langlois, Eric; Resnick, Paul James; Shaw, Michael J.; Young, Ian; Givler, Richard C.; Reinke, Charles M.

    2014-01-01

    After years in the field, many materials suffer degradation, off-gassing, and chemical changes causing build-up of measurable chemical atmospheres. Stand-alone embedded chemical sensors are typically limited in specificity, require electrical lines, and/or calibration drift makes data reliability questionable. Along with size, these "Achilles' heels" have prevented incorporation of gas sensing into sealed, hazardous locations which would highly benefit from in-situ analysis. We report on development of an all-optical, mid-IR, fiber-optic based MEMS Photoacoustic Spectroscopy solution to address these limitations. Concurrent modeling and computational simulation are used to guide hardware design and implementation.

  9. Micro electromechanical systems (MEMS) for mechanical engineers

    Energy Technology Data Exchange (ETDEWEB)

    Lee, A. P., LLNL

    1996-11-18

    The ongoing advances in Microelectromechanical Systems (MEMS) are providing man-kind the freedom to travel to dimensional spaces never before conceivable. Advances include new fabrication processes, new materials, tailored modeling tools, new fabrication machines, systems integration, and more detailed studies of physics and surface chemistry as applied to the micro scale. In the ten years since its inauguration, MEMS technology is penetrating industries of automobile, healthcare, biotechnology, sports/entertainment, measurement systems, data storage, photonics/optics, computer, aerospace, precision instruments/robotics, and environment monitoring. It is projected that by the turn of the century, MEMS will impact every individual in the industrial world, totaling sales up to $14 billion (source: System Planning Corp.). MEMS programs in major universities have spawned up all over the United States, preparing the brain-power and expertise for the next wave of MEMS breakthroughs. It should be pointed out that although MEMS has been initiated by electrical engineering researchers through the involvement of IC fabrication techniques, today it has evolved such that it requires a totally multi-disciplinary team to develop useful devices. Mechanical engineers are especially crucial to the success of MEMS development, since 90% of the physical realm involved is mechanical. Mechanical engineers are needed for the design of MEMS, the analysis of the mechanical system, the design of testing apparatus, the implementation of analytical tools, and the packaging process. Every single aspect of mechanical engineering is being utilized in the MEMS field today, however, the impact could be more substantial if more mechanical engineers are involved in the systems level designing. In this paper, an attempt is made to create the pathways for a mechanical engineer to enter in the MEMS field. Examples of application in optics and medical devices will be used to illustrate how mechanical

  10. Development of a three-dimensionally movable phantom system for dosimetric verifications

    International Nuclear Information System (INIS)

    Nakayama, Hiroshi; Mizowaki, Takashi; Narita, Yuichiro; Kawada, Noriyuki; Takahashi, Kunio; Mihara, Kazumasa; Hiraoka, Masahiro

    2008-01-01

    The authors developed a three-dimensionally movable phantom system (3D movable phantom system) which can reproduce three-dimensional movements to experimentally verify the impact of radiotherapy treatment-related movements on dose distribution. The phantom system consists of three integrated components: a three-dimensional driving mechanism (3D driving mechanism), computer control system, and phantoms for film dosimetry. The 3D driving mechanism is a quintessential part of this system. It is composed of three linear-motion tables (single-axis robots) which are joined orthogonally to each other. This mechanism has a motion range of 100 mm, with a maximum velocity of 200 mm/s in each dimension, and 3D motion ability of arbitrary patterns. These attributes are sufficient to reproduce almost all organ movements. The positional accuracy of this 3D movable phantom system in a state of geostationary is less than 0.1 mm. The maximum error in terms of the absolute position on movement was 0.56 mm. The positional reappearance error on movement was up to 0.23 mm. The observed fluctuation of time was 0.012 s in the cycle of 4.5 s of oscillation. These results suggested that the 3D movable phantom system exhibited a sufficient level of accuracy in terms of geometry and timing to reproduce interfractional organ movement or setup errors in order to assess the influence of these errors on high-precision radiotherapy such as stereotactic irradiation and intensity-modulated radiotherapy. In addition, the authors 3D movable phantom system will also be useful in evaluating the adequacy and efficacy of new treatment techniques such as gating or tracking radiotherapy

  11. Nanostructured gold microelectrodes for extracellular recording from electrogenic cells

    Energy Technology Data Exchange (ETDEWEB)

    Brueggemann, D; Wolfrum, B; Maybeck, V; Mourzina, Y; Jansen, M; Offenhaeusser, A, E-mail: a.offenhaeusser@fz-juelich.de [Institute of Complex Systems and Peter Gruenberg Institute: Bioelectronics (ICS8/PGI8), Forschungszentrum Juelich GmbH, Leo-Brandt-Strasse, 52428 Juelich (Germany); Juelich-Aachen Research Alliance-Fundamental of Future Information Technology (JARA-FIT) (Germany)

    2011-07-01

    We present a new biocompatible nanostructured microelectrode array for extracellular signal recording from electrogenic cells. Microfabrication techniques were combined with a template-assisted approach using nanoporous aluminum oxide to develop gold nanopillar electrodes. The nanopillars were approximately 300-400 nm high and had a diameter of 60 nm. Thus, they yielded a higher surface area of the electrodes resulting in a decreased impedance compared to planar electrodes. The interaction between the large-scale gold nanopillar arrays and cardiac muscle cells (HL-1) was investigated via focused ion beam milling. In the resulting cross-sections we observed a tight coupling between the HL-1 cells and the gold nanostructures. However, the cell membranes did not bend into the cleft between adjacent nanopillars due to the high pillar density. We performed extracellular potential recordings from HL-1 cells with the nanostructured microelectrode arrays. The maximal amplitudes recorded with the nanopillar electrodes were up to 100% higher than those recorded with planar gold electrodes. Increasing the aspect ratio of the gold nanopillars and changing the geometrical layout can further enhance the signal quality in the future.

  12. A Single Platinum Microelectrode for Identifying Soft Drink Samples

    Directory of Open Access Journals (Sweden)

    Lígia Bueno

    2012-01-01

    Full Text Available Cyclic voltammograms recorded with a single platinum microelectrode were used along with a non-supervised pattern recognition, namely, Principal Component Analysis, to conduct a qualitative analysis of sixteen different brands of carbonated soft drinks (Kuat, Soda Antarctica, H2OH!, Sprite 2.0, Guarana Antarctica, Guarana Antarctica Zero, Coca-Cola, Coca-Cola Zero, Coca-Cola Plus, Pepsi, Pepsi Light, Pepsi Twist, Pepsi Twist Light, Pepsi Twist 3, Schin Cola, and Classic Dillar’s. In this analysis, soft drink samples were not subjected to pre-treatment. Good differentiation among all the analysed soft drinks was achieved using the voltammetric data. An analysis of the loading plots shows that the potentials of −0.65 V, −0.4 V, 0.4 V, and 0.750 V facilitated the discrimination process. The electrochemical processes related to this potential are the reduction of hydrogen ions and inhibition of the platinum oxidation by the caffeine adsorption on the electrode surface. Additionally, the single platinum microelectrode was useful for the quality control of the soft drink samples, as it helped to identify the time at which the beverage was opened.

  13. Nanostructured gold microelectrodes for extracellular recording from electrogenic cells.

    Science.gov (United States)

    Brüggemann, D; Wolfrum, B; Maybeck, V; Mourzina, Y; Jansen, M; Offenhäusser, A

    2011-07-01

    We present a new biocompatible nanostructured microelectrode array for extracellular signal recording from electrogenic cells. Microfabrication techniques were combined with a template-assisted approach using nanoporous aluminum oxide to develop gold nanopillar electrodes. The nanopillars were approximately 300-400 nm high and had a diameter of 60 nm. Thus, they yielded a higher surface area of the electrodes resulting in a decreased impedance compared to planar electrodes. The interaction between the large-scale gold nanopillar arrays and cardiac muscle cells (HL-1) was investigated via focused ion beam milling. In the resulting cross-sections we observed a tight coupling between the HL-1 cells and the gold nanostructures. However, the cell membranes did not bend into the cleft between adjacent nanopillars due to the high pillar density. We performed extracellular potential recordings from HL-1 cells with the nanostructured microelectrode arrays. The maximal amplitudes recorded with the nanopillar electrodes were up to 100% higher than those recorded with planar gold electrodes. Increasing the aspect ratio of the gold nanopillars and changing the geometrical layout can further enhance the signal quality in the future.

  14. Optical inspection of hidden MEMS structures

    Science.gov (United States)

    Krauter, Johann; Gronle, Marc; Osten, Wolfgang

    2017-06-01

    Micro-electro-mechanical system's (MEMS) applications have greatly expanded over the recent years, and the MEMS industry has grown almost exponentially. One of the strongest drivers are the automotive and consumer markets. A 100% test is necessary especially in the production of automotive MEMS sensors since they are subject to safety relevant functions. This inspection should be carried out before dicing and packaging since more than 90% of the production costs are incurred during these steps. An electrical test is currently being carried out with each MEMS component. In the case of a malfunction, the defect can not be located on the wafer because the MEMS are no longer optically accessible due to the encapsulation. This paper presents a low coherence interferometer for the topography measurement of MEMS structures located within the wafer stack. Here, a high axial and lateral resolution is necessary to identify defects such as stuck or bent MEMS fingers. First, the boundary conditions for an optical inspection system will be discussed. The setup is then shown with some exemplary measurements.

  15. Design of Surface micromachined Compliant MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Bradley, Joe Anthony [Iowa State Univ., Ames, IA (United States)

    2001-01-01

    The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a micro-compliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMS, most have used comb-drive actuation methods and bulk micromachining processes. This research focuses on fully-compliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms.

  16. Design of Surface Micromachined Compliant MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Bradley, Joe Anthony [Iowa State Univ., Ames, IA (United States)

    2002-12-31

    The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a micro-compliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMs, most have used comb-drive actuation methods and bulk micromachining processes. This research focused on fully-compliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms.

  17. Adhesion aspects in MEMS/NEMS

    CERN Document Server

    Kim, Seong H; Mittal, Kash L

    2012-01-01

    Phenomena associated with the adhesion interaction of surfaces have been a critical aspect of micro- and nanosystem development and performance since the first MicroElectroMechanicalSystems(MEMS) were fabricated. These phenomena are ubiquitous in nature and are present in all systems, however MEMS devices are particularly sensitive to their effects owing to their small size and limited actuation force that can be generated. Extension of MEMS technology concepts to the nanoscale and development of NanoElectroMechanicalSystems(NEMS) will result in systems even more strongly influenced by surface

  18. Practical guide to RF-MEMS

    CERN Document Server

    Iannacci, Jacopo

    2013-01-01

    Closes the gap between hardcore-theoretical and purely experimental RF-MEMS books. The book covers, from a practical viewpoint, the most critical steps that have to be taken in order to develop novel RF-MEMS device concepts. Prototypical RF-MEMS devices, both including lumped components and complex networks, are presented at the beginning of the book as reference examples, and these are then discussed from different perspectives with regard to design, simulation, packaging, testing, and post-fabrication modeling. Theoretical concepts are introduced when necessary to complement the practical

  19. Experiments on pumping of liquids using arrays of microelectrodes subjected to travelling wave potentials

    Energy Technology Data Exchange (ETDEWEB)

    Garcia-Sanchez, P; Ramos, A [Dpto. de Electronica y Electromagnetismo, Universidad de Sevilla, 41012 Sevilla (Spain); Green, Nicolas G; Morgan, H [School of Electronics and Computer Science, University of Southampton, SO17 1BJ Southampton (United Kingdom)], E-mail: pablogarcia@us.es

    2008-12-01

    Net fluid flow of electrolytes driven on an array of microelectrodes subjected to a travelling-wave potential is presented. Two sizes of platinum microelectrodes have been studied. In both arrays, at low voltages the liquid flows according to the prediction given by ac electroosmotic theory. At voltages above a threshold the fluid flow is reversed. Measurements of the electrical current when the microelectrode array is pumping the liquid are also reported. Transient behaviours in both electrical current and fluid velocity have been observed.

  20. Experiments on pumping of liquids using arrays of microelectrodes subjected to travelling wave potentials

    International Nuclear Information System (INIS)

    Garcia-Sanchez, P; Ramos, A; Green, Nicolas G; Morgan, H

    2008-01-01

    Net fluid flow of electrolytes driven on an array of microelectrodes subjected to a travelling-wave potential is presented. Two sizes of platinum microelectrodes have been studied. In both arrays, at low voltages the liquid flows according to the prediction given by ac electroosmotic theory. At voltages above a threshold the fluid flow is reversed. Measurements of the electrical current when the microelectrode array is pumping the liquid are also reported. Transient behaviours in both electrical current and fluid velocity have been observed.

  1. MEMS Gyroscope with Interferometric Detection, Phase II

    Data.gov (United States)

    National Aeronautics and Space Administration — The proposed innovation is a novel MEMS gyroscope that uses micro-interferometric detection to measure the motion of the proof mass. Using an interferometric...

  2. Wireless MEMs BioSensor, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — Crossfield is proposing to develop a low cost, single chip plant bio-monitor using an embedded MEMs based infrared (IR) spectroscopy gas sensor for carbon dioxide...

  3. MEMS and Nano-Technology Clean Room

    Data.gov (United States)

    Federal Laboratory Consortium — The MEMS and Nano-Technology Clean Room is a state-of-the-art, 800 square foot, Class 1000-capable facility used for development of micro and sub-micro scale sensors...

  4. Advanced mechatronics and MEMS devices II

    CERN Document Server

    Wei, Bin

    2017-01-01

    This book introduces the state-of-the-art technologies in mechatronics, robotics, and MEMS devices in order to improve their methodologies. It provides a follow-up to "Advanced Mechatronics and MEMS Devices" (2013) with an exploration of the most up-to-date technologies and their applications, shown through examples that give readers insights and lessons learned from actual projects. Researchers on mechatronics, robotics, and MEMS as well as graduate students in mechanical engineering will find chapters on: Fundamental design and working principles on MEMS accelerometers Innovative mobile technologies Force/tactile sensors development Control schemes for reconfigurable robotic systems Inertial microfluidics Piezoelectric force sensors and dynamic calibration techniques ...And more. Authors explore applications in the areas of agriculture, biomedicine, advanced manufacturing, and space. Micro-assembly for current and future industries is also considered, as well as the design and development of micro and intel...

  5. Fractal Structures For Mems Variable Capacitors

    KAUST Repository

    Elshurafa, Amro M.; Radwan, Ahmed Gomaa Ahmed; Emira, Ahmed A.; Salama, Khaled N.

    2014-01-01

    In accordance with the present disclosure, one embodiment of a fractal variable capacitor comprises a capacitor body in a microelectromechanical system (MEMS) structure, wherein the capacitor body has an upper first metal plate with a fractal shape

  6. Nonlinear Dynamics of Electrostatically Actuated MEMS Arches

    KAUST Repository

    Al Hennawi, Qais M.

    2015-01-01

    In this thesis, we present theoretical and experimental investigation into the nonlinear statics and dynamics of clamped-clamped in-plane MEMS arches when excited by an electrostatic force. Theoretically, we first solve the equation of motion using

  7. Cryogenic MEMS Pressure Sensor, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — A directly immersible cryogenic MEMS pressure sensor will be developed. Each silicon die will contain a vacuum-reference and a tent-like membrane. Offsetting thermal...

  8. MEMS Sensors and Actuators Laboratory (MSAL)

    Data.gov (United States)

    Federal Laboratory Consortium — The MEMS Sensors and Actuators Laboratory (MSAL) in the A.J. Clark School of Engineering at the University of Maryland (UMD) was established in January 2000. Our lab...

  9. Optical MEMS for chemical analysis and biomedicine

    CERN Document Server

    Jiang, Hongrui

    2016-01-01

    This book describes the current state of optical MEMS in chemical and biomedical analysis and brings together current trends and highlights topics representing the most exciting progress in recent years in the field.

  10. Active mems microbeam device for gas detection

    KAUST Repository

    Bouchaala, Adam M.; Jaber, Nizar; Younis, Mohammad I.

    2017-01-01

    Sensors and active switches for applications in gas detection and other fields are described. The devices are based on the softening and hardening nonlinear response behaviors of microelectromechanical systems (MEMS) clamped-clamped microbeams

  11. MEMS-based Circuits and Systems for Wireless Communication

    CERN Document Server

    Kaiser, Andreas

    2013-01-01

    MEMS-based Circuits and Systems for Wireless Communication provides comprehensive coverage of RF-MEMS technology from device to system level. This edited volume places emphasis on how system performance for radio frequency applications can be leveraged by Micro-Electro-Mechanical Systems (MEMS). Coverage also extends to innovative MEMS-aware radio architectures that push the potential of MEMS technology further ahead.  This work presents a broad overview of the technology from MEMS devices (mainly BAW and Si MEMS resonators) to basic circuits, such as oscillators and filters, and finally complete systems such as ultra-low-power MEMS-based radios. Contributions from leading experts around the world are organized in three parts. Part I introduces RF-MEMS technology, devices and modeling and includes a prospective outlook on ongoing developments towards Nano-Electro-Mechanical Systems (NEMS) and phononic crystals. Device properties and models are presented in a circuit oriented perspective. Part II focusses on ...

  12. Micro-fabrication of three dimensional pyrolysed carbon microelectrodes

    DEFF Research Database (Denmark)

    2017-01-01

    ; soft baking the photoresist layer; performing a full depth exposure with UV light through a first mask; performing a partial depth exposure with UV light through a second mask; wherein the full depth exposure and the partial depth exposure are aligned to ensure that the first and second latent images...... are connected to each other; post-exposure baking the photoresist layer; and developing the microscale patterned resist template as a free-standing structure of cross-linked resist with lateral hanging structures that are supported by vertical support structures at a free height above the substrate. The method...... is characterized by a soft baking temperature below 70 °C. Repetitive coating and partial depth exposure allows for the fabrication of multiple level laterally interconnected structures. Carbonization of the resist template provides truly three-dimensional carbon microelectrode structures....

  13. Thin film microelectrodes for electrochemical detection of neurotransmitters

    DEFF Research Database (Denmark)

    Larsen, Simon Tylsgaard

    An important signaling process in the nervous system is the release of chemical messengers called neurotransmitters from neurons. In this thesis alternative thin film electrode materials for applications targeting electrochemical detection of neurotransmitters in chip devices were evaluated...... and conductive polymer microelectrodes made of Pedot:Pss were also fabricated and used successfully to measure transmitter release from cells. The use of different thin film electrodes for low-noise amperometric measurements of single events of transmitter release from neuronal cells was studied....... For this application a very low current noise is needed together with a large temporal resolution. It was shown, that resistive and capacitive properties of thin film electrode materials are determining their usefulness in low-noise amperometric measurements. An analytical expression for the noise was derived...

  14. A 3-D Microelectrode System for Dielectrophoretic Manipulation of Microparticles

    International Nuclear Information System (INIS)

    Chen, D F; Du, H; Gong, H Q; Li, W H

    2006-01-01

    This paper presents a microfluidic system for manipulation and separation of micron-sized particles based on the combined use of negative dielectrophoresis (DEP) and hydrodynamic forces. A 3-D microelectrode structure (so called paired electrode array) are constructed face to face on the top and bottom sides of the microchannel and driven with highfrequency AC voltage to generate dielectrophoretic gates. Depending on the relative strengths of the two forces, particles such as polystyrene beads or cells carrying by a laminar flow can either penetrate the gate or settle there. This gives rise to certain applications including selectively concentrating particles from the flow, separating particles depending on their sizes or dielectric properties, and automatically positioning particles to selective locations. For this purpose, a microfluidic device consisting of the paired electrode array sitting on the channel has been fabricated using microfabrication techniques. Polystyrene beads were used to study the performance of the device. Experimental results including the concentration and separation of particles are presented

  15. Nano-tribology and materials in MEMS

    CERN Document Server

    Satyanarayana, N; Lim, Seh

    2013-01-01

    This book brings together recent developments in the areas of MEMS tribology, novel lubricants and coatings for nanotechnological applications, biomimetics in tribology and fundamentals of micro/nano-tribology. Tribology plays important roles in the functioning and durability of machines at small length scales because of the problems associated with strong surface adhesion, friction, wear etc. Recently, a number of studies have been conducted to understand tribological phenomena at nano/micro scales and many new tribological solutions for MEMS have been proposed.

  16. MEMS for pico- to micro-satellites

    OpenAIRE

    Shea, Herbert

    2009-01-01

    MEMS sensors, actuators, and sub-systems can enable an important reduction in the size and mass of spacecrafts, first by replacing larger and heavier components, then by replacing entire subsystems, and finally by enabling the microfabrication of highly integrated picosats. Very small satellites (1 to 100 kg) stand to benefit the most from MEMS technologies. These small satellites are typically used for science or technology demonstration missions, with higher risk tolerance than multi-ton te...

  17. Recent Progress in Silicon Mems Oscillators

    Science.gov (United States)

    2008-12-01

    MEMS oscillator. As shown, a MEMS resonator is connected to an IC. The reference oscillator, which is basically a transimpedance amplifier ...small size), and (3) DC bias voltage required to operate the resonators. As a result, instead of Colpitts or Pierce architecture, a transimpedence ... amplifier is typically used for sustain the oscillation. The frequency of the resonators is determined by both material properties and geometry of

  18. Digital holography for MEMS and microsystem metrology

    CERN Document Server

    Asundi, Anand

    2011-01-01

    Approaching the topic of digital holography from the practical perspective of industrial inspection, Digital Holography for MEMS and Microsystem Metrology describes the process of digital holography and its growing applications for MEMS characterization, residual stress measurement, design and evaluation, and device testing and inspection. Asundi also provides a thorough theoretical grounding that enables the reader to understand basic concepts and thus identify areas where this technique can be adopted. This combination of both practical and theoretical approach will ensure the

  19. Fabrication of integrated metallic MEMS devices

    DEFF Research Database (Denmark)

    Yalcinkaya, Arda Deniz; Ravnkilde, Jan Tue; Hansen, Ole

    2002-01-01

    A simple and complementary metal oxide semiconductor (CMOS) compatible fabrication technique for microelectromechanical (MEMS) devices is presented. The fabrication technology makes use of electroplated metal layers. Among the fabricated devices, high quality factor microresonators are characteri......A simple and complementary metal oxide semiconductor (CMOS) compatible fabrication technique for microelectromechanical (MEMS) devices is presented. The fabrication technology makes use of electroplated metal layers. Among the fabricated devices, high quality factor microresonators...

  20. Electrodeposition of nickel onto steel, using a thermostatic cell and movable anode by a variable current

    International Nuclear Information System (INIS)

    Vega G, J.D.

    1994-01-01

    In this work, metallic coatings of nickel was made over carbon steel using two different electrolytic solutions: The Watts's bath and the nickel sulfamate bath, using a pulse variable current. The method use was the traditional method, its means a thermostatic cell and one movable anode, which is a few know technique nowadays, it allow realize depositions away from any laboratory or special workshop, it has the advantage to be a portable dispositive. At last of all the electro depositions the coatings quality was valuable by them physical properties like: adhesion, hardness, wrinkled and thickness. The best results was obtain by the Nickel sulfamate bath and movable anode, less in the thickness, which has higher on the thermostatic cell. The variable current was obtain by a Pulse Generator and a Cathodic galvanometer. (Author)

  1. A novel piezoresistive polymer nanocomposite MEMS accelerometer

    International Nuclear Information System (INIS)

    Seena, V; Hari, K; Prajakta, S; Ramgopal Rao, V; Pratap, Rudra

    2017-01-01

    A novel polymer MEMS (micro electro mechanical systems) accelerometer with photo-patternable polymer nanocomposite as a piezoresistor is presented in this work. Polymer MEMS Accelerometer with beam thicknesses of 3.3 µ m and embedded nanocomposite piezoresistive layer having a gauge factor of 90 were fabricated. The photosensitive nanocomposite samples were prepared and characterized for analyzing the mechanical and electrical properties and thereby ensuring proper process parameters for incorporating the piezoresistive layer into the polymer MEMS accelerometer. The microfabrication process flow and unit processes followed are extremely low cost with process temperatures below 100 °C. This also opens up a new possibility for easy integration of such polymer MEMS with CMOS (complementary metal oxide semiconductor) devices and circuits. The fabricated devices were characterized using laser Doppler vibrometer (LDV) and the devices exhibited a resonant frequency of 10.8 kHz and a response sensitivity of 280 nm g −1 at resonance. The main focus of this paper is on the SU-8/CB nanocomposite piezoresistive MEMS accelerometer technology development which covers the material and the fabrication aspects of these devices. CoventorWare FEA analysis performed using the extracted material properties from the experimental characterization which are in close agreement to performance parameters of the fabricated devices is also discussed. The simulated piezoresistive polymer MEMS devices showed an acceleration sensitivity of 126 nm g −1 and 82 ppm of Δ R / R per 1 g of acceleration. (paper)

  2. Conceptual design report for a Fusion Engineering Device sector-handling machine and movable manipulator system

    International Nuclear Information System (INIS)

    Watts, K.D.; Masson, L.S.; McPherson, R.S.

    1982-10-01

    Design requirements, trade studies, design descriptions, conceptual designs, and cost estimates have been completed for the Fusion Engineering Device sector handling machine, movable manipulator system, subcomponent handling machine, and limiter blade handling machine. This information will be used by the Fusion Engineering Design Center to begin to determine the cost and magnitude of the effort required to perform remote maintenance on the Fusion Engineering Device. The designs presented are by no means optimum, and the costs estimates are rough-order-of-magnitude

  3. Quantum theory of shuttling instability in a movable quantum dot array

    Science.gov (United States)

    Donarini, Andrea; Novotný, Tomás; Jauho, Antti-Pekka

    2004-04-01

    We study the shuttling instability in an array of three quantum dots the central one of which is movable. We extend the results by Armour and MacKinnon on this problem to a broader parameter regime. The results obtained by an efficient numerical method are interpreted directly using the Wigner distributions. We emphasize that the instability should be viewed as a crossover phenomenon rather than a clear-cut transition.

  4. Smoothed Particle Hydrodynamics Simulations of Dam-Break Flows Around Movable Structures

    OpenAIRE

    Jian, Wei; Liang, Dongfang; Shao, Songdong; Chen, Ridong; Yang, Kejun

    2015-01-01

    In this paper, 3D weakly compressible and incompressible Smoothed Particle Hydrodynamics (WCSPH & ISPH) models are used to study dam-break flows impacting on either a fixed or a movable structure. First, the two models’ performances are compared in terms of CPU time efficiency and numerical accuracy, as well as the water surface shapes and pressure fields. Then, they are applied to investigate dam-break flow interactions with structures placed in the path of the flood. The study found that th...

  5. Preoperative diagnosis and radiographic findings of a freely movable mucocele of the vermiform appendix

    Energy Technology Data Exchange (ETDEWEB)

    Shukunami, K.-I.; Kaneshima, M.; Kotsuji, F. [Fukui Medical Univ., Dept. of Obstetrics and Gynecology, Matsuoka-Cho, Yoshida-Gun, Fukui (Japan)

    2000-10-01

    Mucocele of the vermiform appendix is rarely diagnosed before surgery, although radiologic and ultrasonographic (US) findings have been reported. To our knowledge, there have been no previous reports of 2 different radiologic images of the cyst in the same patient during the preoperative period. We present 2 different shapes and locations of a freely movable mucocele of the appendix as it appeared before surgery. (author)

  6. Development of movable mask system to cope with high beam current

    International Nuclear Information System (INIS)

    Suetsugu, Y.; Shibata, K.; Sanami, T.; Kageyama, T.; Takeuchi, Y.

    2003-01-01

    The KEK B factory (KEKB), a high current electron-positron collider, has a movable mask (or collimator) system to reduce the background noise in the BELLE detector coming from spent particles. The early movable masks, however, had severe problems of heating, arcing, and vacuum leaks over the stored beam current of several hundred mA. The cause is intense trapped higher order modes (HOMs) excited at the mask head, where the cross section of the beam chamber changed drastically. The mask head, made of copper-tungsten alloy or pure copper, was frequently damaged by hitting of the high energy beam at the same time. Since the problems of the mask were revealed, several kinds of improved masks have been designed employing rf technologies in dealing with the HOM and installed to the ring step by step. Much progress has come from adopting a trapped-mode free structure, where the mask was a bent chamber itself. Recently the further improved mask with a reduced HOM design or HOM dampers was developed to suppress the heating of vacuum components near the mask due to the HOM traveling from the mask. To avoid damage to the mask head, on the other hand, a titanium mask head was tried. The latest masks are working as expected now at the stored beam current of 1.5 A. Presented are the problems and experiences on the movable mask system for the KEKB, which are characteristic of and common in a high intensity accelerator

  7. Movable shark scales act as a passive dynamic micro-roughness to control flow separation

    International Nuclear Information System (INIS)

    Lang, Amy W; Bradshaw, Michael T; Smith, Jonathon A; Wheelus, Jennifer N; Motta, Philip J; Habegger, Maria L; Hueter, Robert E

    2014-01-01

    Shark scales on fast-swimming sharks have been shown to be movable to angles in excess of 50°, and we hypothesize that this characteristic gives this shark skin a preferred flow direction. During the onset of separation, flow reversal is initiated close to the surface. However, the movable scales would be actuated by the reversed flow thereby causing a greater resistance to any further flow reversal and this mechanism would disrupt the process leading to eventual flow separation. Here we report for the first time experimental evidence of the separation control capability of real shark skin through water tunnel testing. Using skin samples from a shortfin mako Isurus oxyrinchus, we tested a pectoral fin and flank skin attached to a NACA 4412 hydrofoil and separation control was observed in the presence of movable shark scales under certain conditions in both cases. We hypothesize that the scales provide a passive, flow-actuated mechanism acting as a dynamic micro-roughness to control flow separation. (paper)

  8. Experiences and future plans of movable mask system for the high current collider KEK B-factory

    International Nuclear Information System (INIS)

    Suetsugu, Yusuke; Kageyama, Tatsuya; Takeuchi, Yasunao; Kanazawa, Ken-ichi; Satoh, Kotarou; Sanami, Toshiya; Hirayama, Hideo

    2002-01-01

    The movable mask is a special device for an accelerator that cuts off spent particles near the beam orbit and reduces background of the detector. For the KEKB, an electron/positron collider with two rings, sixteen movable masks had been installed for each ring. The originally designed masks, however, revealed severe troubles of heating, arcing and vacuum leaks at the stored beam currents of several hundreds mA. Several kinds of improved masks had been designed employing RF technologies and were installed to the ring step by step. The latest masks are working well except for the grooves on the mask head. Here the problems of movable masks so far are summarized and the structures of the latest movable masks and their status are presented. (author)

  9. A three-dimensional microelectrode array composed of vertically aligned ultra-dense carbon nanotube networks

    Science.gov (United States)

    Nick, C.; Yadav, S.; Joshi, R.; Schneider, J. J.; Thielemann, C.

    2015-07-01

    Electrodes based on carbon nanotubes are a promising approach to manufacture highly sensitive sensors with a low limit of signal detection and a high signal-to-noise ratio. This is achieved by dramatically increasing the electrochemical active surface area without increasing the overall geometrical dimensions. Typically, carbon nanotube electrodes are nearly planar and composed of randomly distributed carbon nanotube networks having a limited surface gain for a specific geometrical surface area. To overcome this limitation, we have introduced vertically aligned carbon nanotube (VACNT) networks as electrodes, which are arranged in a microelectrode pattern of 60 single electrodes. Each microelectrode features a very high aspect ratio of more than 300 and thus a dramatically increased surface area. These microelectrodes composed of VACNT networks display dramatically decreased impedance over the entire frequency range compared to planar microelectrodes caused by the enormous capacity increase. This is experimentally verified by electrochemical impedance spectroscopy and cyclic voltammetry.

  10. Low Frequency Activity of Cortical Networks on Microelectrode Arrays is Differentially Altered by Bicuculline and Carbaryl

    Science.gov (United States)

    Thousands of chemicals need to be characterized for their neurotoxicity potential. Neurons grown on microelectrode arrays (MEAs) are an in vitro model used to screen chemicals for functional effects on neuronal networks. Typically, after removal of low frequency components, effec...

  11. Conductive Polymer Microelectrodes for on-chip measurement of transmitter release from living cells

    DEFF Research Database (Denmark)

    Larsen, Simon Tylsgaard; Matteucci, Marco; Taboryski, Rafael J.

    2012-01-01

    driven cell trapping inside closed chip devices. Conductive polymer microelectrodes were used to measure transmitter release using electrochemical methods such as cyclic voltammetry and constant potential amperometry. By measuring the oxidation current at a cyclic voltammogram, the concentration...

  12. A microfluidic cell culture device with integrated microelectrodes for barrier studies

    DEFF Research Database (Denmark)

    Tan, Hsih-Yin; Dufva, Martin; Kutter, Jörg P.

    We present an eight cell culture microfluidic device fabricated using thiol-ene ‘click’ chemistry with embedded microelectrodes for evaluating barrier properties of human intestinal epithelial cells. The capability of the microelectrodes for trans-epithelial electrical resistance (TEER) measureme......) measurements was demonstrated by using confluent human colorectal epithelial cells (Caco-2) and rat fibroblast (CT 26) cells cultured in the microfluidic device....

  13. Carbon-Ring Microelectrode Arrays for Electrochemical Imaging of Single Cell Exocytosis: Fabrication and Characterization

    Science.gov (United States)

    Lin, Yuqing; Trouillon, Raphaël; Svensson, Maria I.; Keighron, Jacqueline D.; Cans, Ann-Sofie; Ewing, Andrew G.

    2012-01-01

    Fabrication of carbon microelectrode arrays, with up to 15 electrodes in total tips as small as 10 to 50 μm, is presented. The support structures of microelectrodes were obtained by pulling multiple quartz capillaries together to form hollow capillary arrays before carbon deposition. Carbon ring microelectrodes were deposited by pyrolysis of acetylene in the lumen of these quartz capillary arrays. Each carbon deposited array tip was filled with epoxy, followed by beveling of the tip of the array to form a deposited carbon-ring microelectrode array (CRMA). Both the number of the microelectrodes in the array and the tip size are independently tunable. These CRMAs have been characterized using scanning electron microscopy, energy dispersive X-ray spectroscopy, and electrogenerated chemiluminescence. Additionally, the electrochemical properties were investigated with steady-state voltammetry. In order to demonstrate the utility of these fabricated microelectrodes in neurochemistry, CRMAs containing eight microring electrodes were used for electrochemical monitoring of exocytotic events from single PC12 cells. Subcellular temporal heterogeneities in exocytosis (ie. cold spots vs. hot spots) were successfully detected with the CRMAs. PMID:22339586

  14. MEMS Rotary Engine Power System

    Science.gov (United States)

    Fernandez-Pello, A. Carlos; Pisano, Albert P.; Fu, Kelvin; Walther, David C.; Knobloch, Aaron; Martinez, Fabian; Senesky, Matt; Stoldt, Conrad; Maboudian, Roya; Sanders, Seth; Liepmann, Dorian

    This work presents a project overview and recent research results for the MEMS Rotary Engine Power System project at the Berkeley Sensor & Actuator Center of the University of California at Berkeley. The research motivation for the project is the high specific energy density of hydrocarbon fuels. When compared with the energy density of batteries, hydrocarbon fuels may have as much as 20x more energy. However, the technical challenge is the conversion of hydrocarbon fuel to electricity in an efficient and clean micro engine. A 12.9 mm diameter Wankel engine will be shown that has already generated 4 Watts of power at 9300rpm. In addition, the 1mm and 2.4 mm Wankel engines that BSAC is developing for power generation at the microscale will be discussed. The project goal is to develop electrical power output of 90milliwatts from the 2.4 mm engine. Prototype engine components have already been fabricated and these will be described. The integrated generator design concept utilizes a nickel-iron alloy electroplated in the engine rotor poles, so that the engine rotor also serves as the generator rotor.

  15. Mid infrared MEMS FTIR spectrometer

    Science.gov (United States)

    Erfan, Mazen; Sabry, Yasser M.; Mortada, Bassem; Sharaf, Khaled; Khalil, Diaa

    2016-03-01

    In this work we report, for the first time to the best of our knowledge, a bulk-micromachined wideband MEMS-based spectrometer covering both the NIR and the MIR ranges and working from 1200 nm to 4800 nm. The core engine of the spectrometer is a scanning Michelson interferometer micro-fabricated using deep reactive ion etching (DRIE) technology. The spectrum is obtained using the Fourier Transform techniques that allows covering a very wide spectral range limited by the detector responsivity. The moving mirror of the interferometer is driven by a relatively large stroke electrostatic comb-drive actuator. Zirconium fluoride (ZrF4) multimode optical fibers are used to connect light between the white light source and the interferometer input, as well as the interferometer output to a PbSe photoconductive detector. The recorded signal-to-noise ratio is 25 dB at the wavelength of 3350 nm. The spectrometer is successfully used in measuring the absorption spectra of methylene chloride, quartz glass and polystyrene film. The presented solution provides a low cost method for producing miniaturized spectrometers in the near-/mid-infrared.

  16. MEMS/MOEMS foundry services at INO

    Science.gov (United States)

    García-Blanco, Sonia; Ilias, Samir; Williamson, Fraser; Généreux, Francis; Le Noc, Loïc; Poirier, Michel; Proulx, Christian; Tremblay, Bruno; Provençal, Francis; Desroches, Yan; Caron, Jean-Sol; Larouche, Carl; Beaupré, Patrick; Fortin, Benoit; Topart, Patrice; Picard, Francis; Alain, Christine; Pope, Timothy; Jerominek, Hubert

    2010-06-01

    In the MEMS manufacturing world, the "fabless" model is getting increasing importance in recent years as a way for MEMS manufactures and startups to minimize equipment costs and initial capital investment. In order for this model to be successful, the fabless company needs to work closely with a MEMS foundry service provider. Due to the lack of standardization in MEMS processes, as opposed to CMOS microfabrication, the experience in MEMS development processes and the flexibility of the MEMS foundry are of vital importance. A multidisciplinary team together with a complete microfabrication toolset allows INO to offer unique MEMS foundry services to fabless companies looking for low to mid-volume production. Companies that benefit from their own microfabrication facilities can also be interested in INO's assistance in conducting their research and development work during periods where production runs keep their whole staff busy. Services include design, prototyping, fabrication, packaging, and testing of various MEMS and MOEMS devices on wafers fully compatible with CMOS integration. Wafer diameters ranging typically from 1 inch to 6 inches can be accepted while 8-inch wafers can be processed in some instances. Standard microfabrication techniques such as metal, dielectric, and semiconductor film deposition and etching as well as photolithographic pattern transfer are available. A stepper permits reduction of the critical dimension to around 0.4 μm. Metals deposited by vacuum deposition methods include Au, Ag, Al, Al alloys, Ti, Cr, Cu, Mo, MoCr, Ni, Pt, and V with thickness varying from 5 nm to 2 μm. Electroplating of several materials including Ni, Au and In is also available. In addition, INO has developed and built a gold black deposition facility to answer customer's needs for broadband microbolometric detectors. The gold black deposited presents specular reflectance of less than 10% in the wavelength range from 0.2 μm to 100 μm with thickness ranging from

  17. A review of vibration-based MEMS piezoelectric energy harvesters

    Energy Technology Data Exchange (ETDEWEB)

    Saadon, Salem; Sidek, Othman [Collaborative Microelectronic Design Excellence Center (CEDEC), School of Electrical and Electronic Engineering, Universiti Sains Malaysia, Engineering Campus, 14300 Nibong Tebal, Seberang Perai Selatan, Pulau Pinang (Malaysia)

    2011-01-15

    The simplicity associated with the piezoelectric micro-generators makes it very attractive for MEMS applications, especially for remote systems. In this paper we reviewed the work carried out by researchers during the last three years. The improvements in experimental results obtained in the vibration-based MEMS piezoelectric energy harvesters show very good scope for MEMS piezoelectric harvesters in the field of power MEMS in the near future. (author)

  18. A Nuclear Microbattery for MEMS Devices

    International Nuclear Information System (INIS)

    Blanchard, James; Henderson, Douglass; Lal, Amit

    2002-01-01

    This project was designed to demonstrate the feasibility of producing on-board power for MEMS devices using radioisotopes. MEMS is a fast growing field, with hopes for producing a wide variety of revolutionary applications, including ''labs on a chip,'' micromachined scanning tunneling microscopes, microscopic detectors for biological agents, microsystems for DNA identification, etc. Currently, these applications are limited by the lack of an on-board power source. Research is ongoing to study approaches such as fuel cells, fossil fuels, and chemical batteries, but all these concepts have limitations. For long-lived, high energy density applications, on-board radioisotope power offers the best choice. We have succeeded in producing such devices using a variety of isotopes, incorporation methods, and device geometries. These experiments have demonstrated the feasibility of using radioisotope power and that there are a variety of options available for MEMS designers. As an example of an integrated, self-powered application, we have created an oscillating cantilever beam that is capable of consistent, periodic oscillations over very long time periods without the need for refueling. Ongoing work will demonstrate that this cantilever is capable of radio frequency transmission, allowing MEMS devices to communicate with one another wirelessly. Thus, this will be the first self-powered wireless transmitter available for use in MEMS devices, permitting such applications as sensors embedded in buildings for continuous monitoring of the building performance and integrity

  19. Applying a foil queue micro-electrode in micro-EDM to fabricate a 3D micro-structure

    Science.gov (United States)

    Xu, Bin; Guo, Kang; Wu, Xiao-yu; Lei, Jian-guo; Liang, Xiong; Guo, Deng-ji; Ma, Jiang; Cheng, Rong

    2018-05-01

    Applying a 3D micro-electrode in a micro electrical discharge machining (micro-EDM) can fabricate a 3D micro-structure with an up and down reciprocating method. However, this processing method has some shortcomings, such as a low success rate and a complex process for fabrication of 3D micro-electrodes. By focusing on these shortcomings, this paper proposed a novel 3D micro-EDM process based on the foil queue micro-electrode. Firstly, a 3D micro-electrode was discretized into several foil micro-electrodes and these foil micro-electrodes constituted a foil queue micro-electrode. Then, based on the planned process path, foil micro-electrodes were applied in micro-EDM sequentially and the micro-EDM results of each foil micro-electrode were able to superimpose the 3D micro-structure. However, the step effect will occur on the 3D micro-structure surface, which has an adverse effect on the 3D micro-structure. To tackle this problem, this paper proposes to reduce this adverse effect by rounded corner wear at the end of the foil micro-electrode and studies the impact of machining parameters on rounded corner wear and the step effect on the micro-structure surface. Finally, using a wire cutting voltage of 80 V, a current of 0.5 A and a pulse width modulation ratio of 1:4, the foil queue micro-electrode was fabricated by wire electrical discharge machining. Also, using a pulse width of 100 ns, a pulse interval of 200 ns, a voltage of 100 V and workpiece material of 304# stainless steel, the foil queue micro-electrode was applied in micro-EDM for processing of a 3D micro-structure with hemispherical features, which verified the feasibility of this process.

  20. Sputtered Encapsulation as Wafer Level Packaging for Isolatable MEMS Devices: A Technique Demonstrated on a Capacitive Accelerometer

    Directory of Open Access Journals (Sweden)

    Azrul Azlan Hamzah

    2008-11-01

    Full Text Available This paper discusses sputtered silicon encapsulation as a wafer level packaging approach for isolatable MEMS devices. Devices such as accelerometers, RF switches, inductors, and filters that do not require interaction with the surroundings to function, could thus be fully encapsulated at the wafer level after fabrication. A MEMSTech 50g capacitive accelerometer was used to demonstrate a sputtered encapsulation technique. Encapsulation with a very uniform surface profile was achieved using spin-on glass (SOG as a sacrificial layer, SU-8 as base layer, RF sputtered silicon as main structural layer, eutectic gold-silicon as seal layer, and liquid crystal polymer (LCP as outer encapsulant layer. SEM inspection and capacitance test indicated that the movable elements were released after encapsulation. Nanoindentation test confirmed that the encapsulated device is sufficiently robust to withstand a transfer molding process. Thus, an encapsulation technique that is robust, CMOS compatible, and economical has been successfully developed for packaging isolatable MEMS devices at the wafer level.

  1. Discovery of Undescribed Brain Tissue Changes Around Implanted Microelectrode Arrays

    Directory of Open Access Journals (Sweden)

    Himanshi Desai

    2012-01-01

    Full Text Available Brain-implantable microelectrode arrays are devicesdesigned to record or electrically stimulate the activity ofneurons in the brain. These devices hold the potential tohelp treat epilepsy, paralysis, blindness, and deafness, andalso provide researchers with insights into a varietyof neural processes, such as memory formation.While these devices have a very promising future,researchers are discovering that their long-termfunctionality is greatly limited by the brain’s naturalimmune response to foreign objects. To improve thefunctional lifetime of these devices, one solution lies infully characterizing and understanding this tissue response.Roles for microglia and astrocytes in this biologicalresponse have been characterized. However, changesto oligodendrocytes, cells that myelinate axons, remainpoorly understood. These cells provide insulationto the axons, which is required for proper neuralfunctioning. Here we report on the changes that occurwith oligodendrocyte processes in tissue aroundmicroelectrode implants in the brain.Six rats were surgically implanted with microelectrodearrays and allowed to recover for 1, 2, or 4 weeks.Subjects were then sacrificed and the brain tissue wasprocessed using our recently developed method, Device-Capture Histology. Immunohistochemistry and confocalmicroscopy was employed to assess the responsearound the device. Results indicated a decrease inoligodendrocyte density and a loss in typical directionalorientation of oligodendrocyte processes in tissue near thedevice. These results suggest alterations in the underlyingneuronal networks around these devices, which maygreatly impact the current functional utility of thesepromising devices.

  2. Investigating brain functional evolution and plasticity using microelectrode array technology.

    Science.gov (United States)

    Napoli, Alessandro; Obeid, Iyad

    2015-10-01

    The aim of this work was to investigate long and short-term plasticity responsible for memory formation in dissociated neuronal networks. In order to address this issue, a set of experiments was designed and implemented in which the microelectrode array electrode grid was divided into four quadrants, two of which were chronically stimulated, every two days for one hour with a stimulation paradigm that varied over time. Overall network and quadrant responses were then analyzed to quantify what level of plasticity took place in the network and how this was due to the stimulation interruption. The results demonstrate that there were no spatial differences in the stimulus-evoked activity within quadrants. Furthermore, the implemented stimulation protocol induced depression effects in the neuronal networks as demonstrated by the consistently lower network activity following stimulation sessions. Finally, the analysis demonstrated that the inhibitory effects of the stimulation decreased over time, thus suggesting a habituation phenomenon. These findings are sufficient to conclude that electrical stimulation is an important tool to interact with dissociated neuronal cultures, but localized stimuli are not enough to drive spatial synaptic potentiation or depression. On the contrary, the ability to modulate synaptic temporal plasticity was a feasible task to achieve by chronic network stimulation. Copyright © 2015 Elsevier Inc. All rights reserved.

  3. Optical MEMS for earth observation payloads

    Science.gov (United States)

    Rodrigues, B.; Lobb, D. R.; Freire, M.

    2017-11-01

    An ESA study has been taken by Lusospace Ltd and Surrey Satellite Techonoly Ltd (SSTL) into the use of optical Micro Eletro-Mechanical Systems (MEMS) for earth Observation. A review and analysis was undertaken of the Micro-Optical Electro-Mechanical Systems (MOEMS) available in the market with potential application in systems for Earth Observation. A summary of this review will be presented. Following the review two space-instrument design concepts were selected for more detailed analysis. The first was the use of a MEMS device to remove cloud from Earth images. The concept is potentially of interest for any mission using imaging spectrometers. A spectrometer concept was selected and detailed design aspects and benefits evaluated. The second concept developed uses MEMS devices to control the width of entrance slits of spectrometers, to provide variable spectral resolution. This paper will present a summary of the results of the study.

  4. MEMS tunable grating micro-spectrometer

    Science.gov (United States)

    Tormen, Maurizio; Lockhart, R.; Niedermann, P.; Overstolz, T.; Hoogerwerf, A.; Mayor, J.-M.; Pierer, J.; Bosshard, C.; Ischer, R.; Voirin, G.; Stanley, R. P.

    2017-11-01

    The interest in MEMS based Micro-Spectrometers is increasing due to their potential in terms of flexibility as well as cost, low mass, small volume and power savings. This interest, especially in the Near-Infrared and Mid- Infrared, ranges from planetary exploration missions to astronomy, e.g. the search for extra solar planets, as well as to many other terrestrial fields of application such as, industrial quality and surface control, chemical analysis of soil and water, detection of chemical pollutants, exhausted gas analysis, food quality control, process control in pharmaceuticals, to name a few. A compact MEMS-based Spectrometer for Near- Infrared and Mid-InfraRed operation have been conceived, designed and demonstrated. The design based on tunable MEMS blazed grating, developed in the past at CSEM [1], achieves state of the art results in terms of spectral resolution, operational wavelength range, light throughput, overall dimensions, and power consumption.

  5. Mechanical performance of SiC based MEMS capacitive microphone for ultrasonic detection in harsh environment

    Science.gov (United States)

    Zawawi, S. A.; Hamzah, A. A.; Mohd-Yasin, F.; Majlis, B. Y.

    2017-08-01

    In this project, SiC based MEMS capacitive microphone was developed for detecting leaked gas in extremely harsh environment such as coal mines and petroleum processing plants via ultrasonic detection. The MEMS capacitive microphone consists of two parallel plates; top plate (movable diaphragm) and bottom (fixed) plate, which separated by an air gap. While, the vent holes were fabricated on the back plate to release trapped air and reduce damping. In order to withstand high temperature and pressure, a 1.0 μm thick SiC diaphragm was utilized as the top membrane. The developed SiC could withstand a temperature up to 1400°C. Moreover, the 3 μm air gap is invented between the top membrane and the bottom plate via wafer bonding. COMSOL Multiphysics simulation software was used for design optimization. Various diaphragms with sizes of 600 μm2, 700 μm2, 800 μm2, 900 μm2 and 1000 μm2 are loaded with external pressure. From this analysis, it was observed that SiC microphone with diaphragm width of 1000 μm2 produced optimal surface vibrations, with first-mode resonant frequency of approximately 36 kHz. The maximum deflection value at resonant frequency is less than the air gap thickness of 8 mu;m, thus eliminating the possibility of shortage between plates during operation. As summary, the designed SiC capacitive microphone has high potential and it is suitable to be applied in ultrasonic gas leaking detection in harsh environment.

  6. Study of the Behavior of the Mercury on Diverse Microelectrodes with Cell of Continuous Flow

    International Nuclear Information System (INIS)

    Cruz Valldeperas, F

    2001-01-01

    A comparative study of six types of microelectrodes in two different support electrolytes was developed using a new analytic technique for analysis of mercury in liquid samples in the ambit of parts by million. For it, a new system of cell of continuous flow and platinum microelectrodes and of platinum with gold film was implemented using volt-amperemetry of anodized spoil with square wave. In a preliminary study, some parameters that characterize the analysis with this new cell were optimized, for example the sample's speed flow and the time of electrodeposition. The calibration curves were made for the different types of microelectrode that were used in an ambit of concentrations of 1-10 ppm. According to the obtained results, the microelectrode that better works is the platinum disk for possessing bigger superficial area exposed to the dissolution, which increases the analite's currents of pick. And as a support electrolyte, potassium tiocianato is recommended because of its effectiveness to solve the analytic sign of the mercury. Studies of answer of the current of mercury regarding the quantity of the placed sample and studies of interferences of the analysis with this type of microelectrode were also carried out. With regard to the study of the quantity of sample, it was obtained that the electrochemical answer of the cell is directly proportional to the concentration of the analite placed in it. In the study of interference, it was found that the copper, lead, and zinc ions affect the analysis of mercury in concentrations of 0.1 ppm and on in the case of the microelectrode of platinum disk. And in case that the same microelectrode is used recovered with gold, it only affects the copper in concentrations over 5 ppm, for what is necessary to take into account a previous treatment of the sample in the event of containing some of the interfering ions [es

  7. Physicochemical properties of peptide-coated microelectrode arrays and their in vitro effects on neuroblast cells

    Energy Technology Data Exchange (ETDEWEB)

    Ghane-Motlagh, Bahareh, E-mail: bahar.ghane@gmail.com [Polystim Neurotechnologies Laboratory, Department of Electrical Engineering, Polytechnique Montreal, QC H3C 3A7 (Canada); Javanbakht, Taraneh; Shoghi, Fatemeh; Wilkinson, Kevin J.; Martel, Richard [Department of Chemistry, University of Montreal, QC H3C 3J7 (Canada); Sawan, Mohamad [Polystim Neurotechnologies Laboratory, Department of Electrical Engineering, Polytechnique Montreal, QC H3C 3A7 (Canada)

    2016-11-01

    Silicon micromachined neural electrode arrays, which act as an interface between bioelectronic devices and neural tissues, play an important role in chronic implants, in vivo. The biological compatibility of chronic microelectrode arrays (MEA) is an essential factor that must be taken into account in their design and fabrication. In order to improve biocompatibility of the MEAs, the surface of the electrodes was coated with polyethylene glycol (PEG) and parylene-C, which are biocompatible polymers. An in vitro study was performed to test the capacity of poly-D-lysine (PDL) to improve neural-cell adhesion and proliferation. Increased proliferation of the neuroblast cells on the microelectrodes was observed in the presence of the PDL. The presence of the peptide on the electrode surface was confirmed using Fourier transform infrared spectroscopy and scanning electron microscopy (SEM). The impedance of the electrodes was not changed significantly before and after PDL deposition. Mouse neuroblast cells were seeded and cultured on the PDL coated and uncoated neural MEAs with different tip-coatings such as platinum, molybdenum, gold, sputtered iridium oxide, and carbon nanotubes. The neuroblast cells grew preferentially on and around peptide coated-microelectrode tips, as compared to the uncoated microelectrodes. - Highlights: • A novel high-density microelectrode array (MEA) for intracortical 3D recording and stimulation was designed and fabricated. • In order to improve neural-cell adhesion and proliferation, the surface of the electrodes was coated with poly-D-lysine (PDL). • An in vitro study was performed to test the capacity of PDL to improve cell adhesion and proliferation. • The neuroblast cells grew preferentially on peptide-coated microelectrode tips compared to the uncoated microelectrodes.

  8. A Movable Phantom Design for Quantitative Evaluation of Motion Correction Studies on High Resolution PET Scanners

    DEFF Research Database (Denmark)

    Olesen, Oline Vinter; Svarer, C.; Sibomana, M.

    2010-01-01

    maximization algorithm with modeling of the point spread function (3DOSEM-PSF), and they were corrected for motions based on external tracking information using the Polaris Vicra real-time stereo motion-tracking system. The new automatic, movable phantom has a robust design and is a potential quality......Head movements during brain imaging using high resolution positron emission tomography (PET) impair the image quality which, along with the improvement of the spatial resolution of PET scanners, in general, raises the importance of motion correction. Here, we present a new design for an automatic...

  9. Experimental study on the scram of electromagnetic movable coil control rod drive mechanism

    International Nuclear Information System (INIS)

    Sun Changlong; Bo Hanliang; Jiang Shengyao; Zhang Hongchao; Ma Cang; Wang Jinhua; Qin Benke

    2006-01-01

    Electromagnetic movable coil control rod drive mechanism is a new type drive mechanism. The drive mechanism is experimentally studied to gain the characteristic of scram time. Further more, the reason of the different scram phenomena is analyzed and the disciplinarian of scram is also summarized. On the base of series experiments it can be concluded that scram time of AC break is longer than that of DC break and the residual current of coil's can distinctly influence the scram time. The scram time of AC break is 300-700 ms longer than that of DC break. (authors)

  10. Development of a movable table for a bending magnet with removable guides

    International Nuclear Information System (INIS)

    Shibuya, T.; Ito, I.; Kudoh, H.

    2004-01-01

    We develop the movable table for a bending magnet with removable guides. This table has two parallel rails in order to move the bending magnet smoothly and set it precisely. Especially this table has two removable expanded rail guides. Removing this expanded rail guides allow us to make more enough spaces, for example, to install another insertion devices. We measure the reliability of setting this table by moving this table along the rails. And we found this reliability is less than ±3 μm. We also measure the long-term stability of this table setting. (author)

  11. RF MEMS theory, design, and technology

    CERN Document Server

    Rebeiz, Gabriel M

    2003-01-01

    Ultrasmall Radio Frequency and Micro-wave Microelectromechanical systems (RF MEMs), such as switches, varactors, and phase shifters, exhibit nearly zero power consumption or loss. For this reason, they are being developed intensively by corporations worldwide for use in telecommunications equipment. This book acquaints readers with the basics of RF MEMs and describes how to design practical circuits and devices with them. The author, an acknowledged expert in the field, presents a range of real-world applications and shares many valuable tricks of the trade.

  12. Enabling technology for MEMS and nanodevices

    CERN Document Server

    Baltes, Henry; Fedder, Gary K; Hierold, Christofer; Korvink, Jan G; Tabata, Osamu

    2013-01-01

    This softcover edition of the eponymous volume from the successful ""Advanced Micro & Nanosystems"" series covers all aspects of fabrication of MEMS under CMOS-compatible conditions from design to implementation.It examines the various routes and methods to combine electronics generated by the CMOS technology with novel micromechanical parts into one-chip solutions. Various approaches, fundamental and technological aspects as well as strategies leading to different types of functionalities and presented in detail.For the practicing engineer as well as MSc and PhD students on MEMS cours

  13. Hermeticity testing of MEMS and microelectronic packages

    CERN Document Server

    Costello, Suzanne

    2013-01-01

    Packaging of microelectronics has been developing since the invention of the transistor in 1947. With the increasing complexity and decreasing size of the die, packaging requirements have continued to change. A step change in package requirements came with the introduction of the Micro-Electro-Mechanical System (MEMS) whereby interactions with the external environment are, in some cases, required.This resource is a rapid, definitive reference on hermetic packaging for the MEMS and microelectronics industry, giving practical guidance on traditional and newly developed test methods. This book in

  14. Applications of MEMS for Space Exploration

    Science.gov (United States)

    Tang, William C.

    1998-03-01

    Space exploration in the coming century will emphasize cost effectiveness and highly focused mission objectives, which will result in frequent multiple missions that broaden the scope of space science and to validate new technologies on a timely basis. Micro Electro Mechanical Systems (MEMS) is one of the key enabling technologies to create cost-effective, ultra-miniaturized, robust, and functionally focused spacecraft for both robotic and human exploration programs. Examples of MEMS devices at various stages of development include microgyroscope, microseismometer, microhygrometer, quadrupole mass spectrometer, and micropropulsion engine. These devices, when proven successful, will serve as models for developing components and systems for new-millennium spacecraft.

  15. Antenna Miniaturization with MEMS Tunable Capacitors

    DEFF Research Database (Denmark)

    Barrio, Samantha Caporal Del; Morris, Art; Pedersen, Gert Frølund

    2014-01-01

    In today’s mobile device market, there is a strong need for efficient antenna miniaturization. Tunable antennas are a very promising way to reduce antenna volume while enlarging its operating bandwidth. MEMS tunable capacitors are state-ofthe- art in terms of insertion loss and their characterist......In today’s mobile device market, there is a strong need for efficient antenna miniaturization. Tunable antennas are a very promising way to reduce antenna volume while enlarging its operating bandwidth. MEMS tunable capacitors are state-ofthe- art in terms of insertion loss...

  16. PolyMEMS Actuator: A Polymer-Based Microelectromechanical (MEMS) Actuator with Macroscopic Action

    Science.gov (United States)

    2002-09-01

    DIRECTOR: MICHAEL L. TALBERT, Maj., USAF Technical Advisor , Information Technology Division Information Directorate...technologies meet even two of the four requirements, whereas PolyMEMS meets all four. Robo -Lobster Courtesy of Dr. Joseph Ayers, Northeastern

  17. Chitosan coated carbon fiber microelectrode for selective in vivo detection of neurotransmitters in live zebrafish embryos

    International Nuclear Information System (INIS)

    Ozel, Rifat Emrah; Wallace, Kenneth N.; Andreescu, Silvana

    2011-01-01

    Graphical abstract: Chitosan coated fiber electrodes are sensitive to serotonin detection while rejecting physiological levels of ascorbic acid interferences. - Abstract: We report the development of a chitosan modified carbon fiber microelectrode for in vivo detection of serotonin. We find that chitosan has the ability to reject physiological levels of ascorbic acid interferences and facilitate selective and sensitive detection of in vivo levels of serotonin, a common catecholamine neurotransmitter. Presence of chitosan on the microelectrode surface was investigated using scanning electron microscopy (SEM) and cyclic voltammetry (CV). The electrode was characterized using differential pulse voltammetry (DPV). A detection limit of 1.6 nM serotonin with a sensitivity of 5.12 nA/μM, a linear range from 2 to 100 nM and a reproducibility of 6.5% for n = 6 electrodes were obtained. Chitosan modified microelectrodes selectively measure serotonin in presence of physiological levels of ascorbic acid. In vivo measurements were performed to measure concentration of serotonin in the live embryonic zebrafish intestine. The sensor quantifies in vivo intestinal levels of serotonin while successfully rejecting ascorbic acid interferences. We demonstrate that chitosan can be used as an effective coating to reject ascorbic acid interferences at carbon fiber microelectrodes, as an alternative to Nafion, and that chitosan modified microelectrodes are reliable tools for in vivo monitoring of changes in neurotransmitter levels.

  18. Acute human brain responses to intracortical microelectrode arrays: Challenges and future prospects

    Directory of Open Access Journals (Sweden)

    Eduardo eFernandez

    2014-07-01

    Full Text Available The emerging field of neuroprosthetics is focused on the development of new therapeutic interventions that will be able to restore some lost neural function by selective electrical stimulation or by harnessing activity recorded from populations of neurons. As more and more patients benefit from these approaches, the interest in neural interfaces has grown significantly and a new generation of penetrating microelectrode arrays are providing unprecedented access to the neurons of the CNS. These microelectrodes have active tip dimensions that are similar in size to neurons and because they penetrate the nervous system, they provide selective access to these cells (within a few microns. However, the very long-term viability of chronically implanted microelectrodes and the capability of recording the same spiking activity over long time periods still remain to be established and confirmed in human studies. Here we review the main responses to acute implantation of microelectrode arrays, and emphasize that it will become essential to control the neural tissue damage induced by these intracortical microelectrodes in order to achieve the high clinical potentials accompanying this technology.

  19. Brain machine interfaces combining microelectrode arrays with nanostructured optical biochemical sensors

    Science.gov (United States)

    Hajj-Hassan, Mohamad; Gonzalez, Timothy; Ghafer-Zadeh, Ebrahim; Chodavarapu, Vamsy; Musallam, Sam; Andrews, Mark

    2009-02-01

    Neural microelectrodes are an important component of neural prosthetic systems which assist paralyzed patients by allowing them to operate computers or robots using their neural activity. These microelectrodes are also used in clinical settings to localize the locus of seizure initiation in epilepsy or to stimulate sub-cortical structures in patients with Parkinson's disease. In neural prosthetic systems, implanted microelectrodes record the electrical potential generated by specific thoughts and relay the signals to algorithms trained to interpret these thoughts. In this paper, we describe novel elongated multi-site neural electrodes that can record electrical signals and specific neural biomarkers and that can reach depths greater than 8mm in the sulcus of non-human primates (monkeys). We hypothesize that additional signals recorded by the multimodal probes will increase the information yield when compared to standard probes that record just electropotentials. We describe integration of optical biochemical sensors with neural microelectrodes. The sensors are made using sol-gel derived xerogel thin films that encapsulate specific biomarker responsive luminophores in their nanostructured pores. The desired neural biomarkers are O2, pH, K+, and Na+ ions. As a prototype, we demonstrate direct-write patterning to create oxygen-responsive xerogel waveguide structures on the neural microelectrodes. The recording of neural biomarkers along with electrical activity could help the development of intelligent and more userfriendly neural prosthesis/brain machine interfaces as well as aid in providing answers to complex brain diseases and disorders.

  20. Chitosan coated carbon fiber microelectrode for selective in vivo detection of neurotransmitters in live zebrafish embryos

    Energy Technology Data Exchange (ETDEWEB)

    Ozel, Rifat Emrah [Department of Chemistry and Biomolecular Science, 8 Clarkson Ave, Potsdam, NY 136995810 (United States); Wallace, Kenneth N. [Department of Biology, Clarkson University, Potsdam, NY 136995810 (United States); Andreescu, Silvana, E-mail: eandrees@clarkson.edu [Department of Chemistry and Biomolecular Science, 8 Clarkson Ave, Potsdam, NY 136995810 (United States)

    2011-06-10

    Graphical abstract: Chitosan coated fiber electrodes are sensitive to serotonin detection while rejecting physiological levels of ascorbic acid interferences. - Abstract: We report the development of a chitosan modified carbon fiber microelectrode for in vivo detection of serotonin. We find that chitosan has the ability to reject physiological levels of ascorbic acid interferences and facilitate selective and sensitive detection of in vivo levels of serotonin, a common catecholamine neurotransmitter. Presence of chitosan on the microelectrode surface was investigated using scanning electron microscopy (SEM) and cyclic voltammetry (CV). The electrode was characterized using differential pulse voltammetry (DPV). A detection limit of 1.6 nM serotonin with a sensitivity of 5.12 nA/{mu}M, a linear range from 2 to 100 nM and a reproducibility of 6.5% for n = 6 electrodes were obtained. Chitosan modified microelectrodes selectively measure serotonin in presence of physiological levels of ascorbic acid. In vivo measurements were performed to measure concentration of serotonin in the live embryonic zebrafish intestine. The sensor quantifies in vivo intestinal levels of serotonin while successfully rejecting ascorbic acid interferences. We demonstrate that chitosan can be used as an effective coating to reject ascorbic acid interferences at carbon fiber microelectrodes, as an alternative to Nafion, and that chitosan modified microelectrodes are reliable tools for in vivo monitoring of changes in neurotransmitter levels.

  1. Numerical Simulation of a Novel Electroosmotic Micropump for Bio-MEMS Applications

    Directory of Open Access Journals (Sweden)

    Alireza Alishahi

    2014-12-01

    Full Text Available High lamination in microchannel is one of the main challenges in Lab-On-a-Chip’s components like micro total analyzer systems and any miniaturization of fluid channels intensify the viscose effects. In chip-scale, the electroosmotic flow is more efficient. Therefore, this study presents a MEMS-based low-voltage micropump for low-conductive biological samples and solutions, where twelve narrow miniaturized microchannels designed in one unit to efficiently using the electroosmotic effects which generated near the walls. Four microelectrodes are mounted in lateral sides of the microchannel and excited by low-voltage potential to generate pumping process inside the channel. We sweep the voltage amplitude and a linear variation of fluid velocity achieved by Finite-Element-Method (FEM simulation. We obtain a net average velocity of 0.1 mm/s; by applying 2 V and -2 V to the electrodes. Therefore, the proposed low-voltage design is able to pumping the low-conductive biofluids for conventional lab-on-a-chip applications.

  2. Effects of the partially movable control fin with end plate of underwater vehicle

    Directory of Open Access Journals (Sweden)

    Chul-Min Jung

    2017-01-01

    Full Text Available Underwater torpedo has control fin with very low aspect ratio due to launching from limited size of cylindrical torpedo tube. If the aspect ratio of control fin of underwater vehicle is very low three-dimensional flow around control fin largely reduces control forces. In this study, the end plate was applied to reduce the three-dimensional flow effects of partially movable control fin of underwater vehicle. Through numerical simulations the flow field around control fin was examined with and without end plate for different flap angles. The pressure, vorticity, lift and torque on the control fin were analyzed and compared to experiments. The comparison have shown a reasonable agreement between numerical and experimental results and the effect of end plate on a low aspect ratio control fin. When the end plate was attached to the movable control fin, the lift increased and the actuator shaft torque did not significantly change. As this means less consumption of the actuator shaft torque compared to the control fin that has the same control force, the inner actuator capacity can be reduced and energy consumption can be saved. Considering this, it is expected to be effectively applied to the control fin design of underwater vehicles such as torpedoes.

  3. Characterization of piezoelectric polymer composites for MEMS ...

    Indian Academy of Sciences (India)

    are obtained so that higher energy densities can be achieved along with ... The quality and reliability of MEMS ... beam are coupled and the bottom face is grounded. The top .... The electrical and mechanical responses of the material near the ...

  4. Fractal Structures For Mems Variable Capacitors

    KAUST Repository

    Elshurafa, Amro M.

    2014-08-28

    In accordance with the present disclosure, one embodiment of a fractal variable capacitor comprises a capacitor body in a microelectromechanical system (MEMS) structure, wherein the capacitor body has an upper first metal plate with a fractal shape separated by a vertical distance from a lower first metal plate with a complementary fractal shape; and a substrate above which the capacitor body is suspended.

  5. Novel RF-MEMS capacitive switching structures

    NARCIS (Netherlands)

    Rottenberg, X.; Jansen, Henricus V.; Fiorini, P.; De Raedt, W.; Tilmans, H.A.C.

    2002-01-01

    This paper reports on novel RF-MEMS capacitive switching devices implementing an electrically floating metal layer covering the dielectric to ensure intimate contact with the bridge in the down state. This results in an optimal switch down capacitance and allows optimisation of the down/up

  6. Characterization of dielectric charging in RF MEMS

    NARCIS (Netherlands)

    Herfst, R.W.; Huizing, H.G.A.; Steeneken, P.G.; Schmitz, Jurriaan

    2005-01-01

    Capacitive RF MEMS switches show great promise for use in wireless communication devices such as mobile phones, but the successful application of these switches is hindered by the reliability of the devices: charge injection in the dielectric layer (SiN) can cause irreversible stiction of the moving

  7. A Virtual Pivot Point MEMS Actuator with Externally Mounted Mirror: Design, Fabrication and Characterization

    Directory of Open Access Journals (Sweden)

    T. M. Fahim AMIN

    2014-12-01

    Full Text Available In this paper, the design, fabrication, and characterization of a virtual pivot point micro electromechanical systems (MEMS electrostatic actuator with externally mounted mirror is presented. The point of rotation of the movable arm of the actuator is distant from the physical actuator. This is a requirement for certain applications, such as an external cavity laser in Littman configuration. A maximum rotational radius of 5 mm from the virtual pivot point was achieved. A detailed analytical analysis for the displacement of the structure is presented. The dynamic characterization of the device with a finite element analysis simulation shows that the resonance frequency of the in-plane rotational mode is well separated from that of the out-of-plane bending mode, confirming high in-plane stability. The devices were fabricated on a silicon-on-insulator wafer with device layer thickness of 100 µm. Thin mirrors were fabricated by dicing a 100 µm thick silicon wafer. A resonance frequency of about 5.9 ´ 102 Hz for the maximum sized mounted mirror (1.7 mm ´ 100 µm ´ 1.0 mm was determined by optical characterization.

  8. Calibration of High Frequency MEMS Microphones

    Science.gov (United States)

    Shams, Qamar A.; Humphreys, William M.; Bartram, Scott M.; Zuckewar, Allan J.

    2007-01-01

    Understanding and controlling aircraft noise is one of the major research topics of the NASA Fundamental Aeronautics Program. One of the measurement technologies used to acquire noise data is the microphone directional array (DA). Traditional direction array hardware, consisting of commercially available condenser microphones and preamplifiers can be too expensive and their installation in hard-walled wind tunnel test sections too complicated. An emerging micro-machining technology coupled with the latest cutting edge technologies for smaller and faster systems have opened the way for development of MEMS microphones. The MEMS microphone devices are available in the market but suffer from certain important shortcomings. Based on early experiments with array prototypes, it has been found that both the bandwidth and the sound pressure level dynamic range of the microphones should be increased significantly to improve the performance and flexibility of the overall array. Thus, in collaboration with an outside MEMS design vendor, NASA Langley modified commercially available MEMS microphone as shown in Figure 1 to meet the new requirements. Coupled with the design of the enhanced MEMS microphones was the development of a new calibration method for simultaneously obtaining the sensitivity and phase response of the devices over their entire broadband frequency range. Over the years, several methods have been used for microphone calibration. Some of the common methods of microphone calibration are Coupler (Reciprocity, Substitution, and Simultaneous), Pistonphone, Electrostatic actuator, and Free-field calibration (Reciprocity, Substitution, and Simultaneous). Traditionally, electrostatic actuators (EA) have been used to characterize air-condenser microphones for wideband frequency ranges; however, MEMS microphones are not adaptable to the EA method due to their construction and very small diaphragm size. Hence a substitution-based, free-field method was developed to

  9. Preparation of metal nanoband microelectrode on poly(dimethylsiloxane) for chip-based amperometric detection

    Energy Technology Data Exchange (ETDEWEB)

    Chen Shaopeng; Wu Jian; Yu Xiaodong [Key Laboratory of Analytical Chemistry for Life Science, Ministry of Education of China, School of Chemistry and Chemical Engineering, Nanjing University, Nanjing 210093 (China); Xu Jingjuan, E-mail: xujj@nju.edu.cn [Key Laboratory of Analytical Chemistry for Life Science, Ministry of Education of China, School of Chemistry and Chemical Engineering, Nanjing University, Nanjing 210093 (China); Chen Hongyuan [Key Laboratory of Analytical Chemistry for Life Science, Ministry of Education of China, School of Chemistry and Chemical Engineering, Nanjing University, Nanjing 210093 (China)

    2010-04-30

    We proposed herein a novel approach for fabricating nanoband microelectrodes for electrochemical detection on an electrophoresis microchip. The metal films were first obtained via region-selective electroless deposition of gold or copper films on PDMS substrates by selective region plasma oxidation through shadow masking. Both metal films show uniform surfaces with the thickness at the level of 100 nm. By casting another PDMS layer on the metal films, the cross section of the sandwich structures can be used as nanoband microelectrodes, which can be renewed just by cutting. These nanoband microelectrodes are successfully used as electrochemical detectors in microchip electrophoresis for the detection of amino acids, proteins and neurotransmitter molecules. Moreover, integrating an Au-Cu double-metal detector with a double-channel electrophoresis system, we can easily distinguish electroactive amino acids from that of non-electroactive amino acids.

  10. A novel method for the fabrication of a high-density carbon nanotube microelectrode array

    Directory of Open Access Journals (Sweden)

    Adam Khalifa

    2015-09-01

    Full Text Available We present a novel method for fabricating a high-density carbon nanotube microelectrode array (MEA chip. Vertically aligned carbon nanotubes (VACNTs were synthesized by microwave plasma-enhanced chemical vapor deposition and thermal chemical vapor deposition. The device was characterized using electrochemical experiments such as cyclic voltammetry, impedance spectroscopy and potential transient measurements. Through-silicon vias (TSVs were fabricated and partially filled with polycrystalline silicon to allow electrical connection from the high-density electrodes to a stimulator microchip. In response to the demand for higher resolution implants, we have developed a unique process to obtain a high-density electrode array by making the microelectrodes smaller in size and designing new ways of routing the electrodes to current sources. Keywords: Microelectrode array, Neural implant, Carbon nanotubes, Through-silicon via interconnects, Microfabrication

  11. Chronic microelectrode investigations of normal human brain physiology using a hybrid depth electrode.

    Science.gov (United States)

    Howard, M A; Volkov, I O; Noh, M D; Granner, M A; Mirsky, R; Garell, P C

    1997-01-01

    Neurosurgeons have unique access to in vivo human brain tissue, and in the course of clinical treatment important scientific advances have been made that further our understanding of normal brain physiology. In the modern era, microelectrode recordings have been used to systematically investigate the cellular properties of lateral temporal cerebral cortex. The current report describes a hybrid depth electrode (HDE) recording technique that was developed to enable neurosurgeons to simultaneously investigate normal cellular physiology during chronic intracranial EEG recordings. The HDE combines microelectrode and EEG recordings sites on a single shaft. Multiple microelectrode recordings are obtained from MRI defined brain sites and single-unit activity is discriminated from these data. To date, over 60 HDEs have been placed in 20 epilepsy surgery patients. Unique physiologic data have been gathered from neurons in numerous brain regions, including amygdala, hippocampus, frontal lobe, insula and Heschl's gyrus. Functional activation studies were carried out without risking patient safety or comfort.

  12. MEMS Actuators for Improved Performance and Durability

    Science.gov (United States)

    Yearsley, James M.

    Micro-ElectroMechanical Systems (MEMS) devices take advantage of force-scaling at length scales smaller than a millimeter to sense and interact with directly with phenomena and targets at the microscale. MEMS sensors found in everyday devices like cell-phones and cars include accelerometers, gyros, pressure sensors, and magnetic sensors. MEMS actuators generally serve more application specific roles including micro- and nano-tweezers used for single cell manipulation, optical switching and alignment components, and micro combustion engines for high energy density power generation. MEMS rotary motors are actuators that translate an electric drive signal into rotational motion and can serve as rate calibration inputs for gyros, stages for optical components, mixing devices for micro-fluidics, etc. Existing rotary micromotors suffer from friction and wear issues that affect lifetime and performance. Attempts to alleviate friction effects include surface treatment, magnetic and electrostatic levitation, pressurized gas bearings, and micro-ball bearings. The present work demonstrates a droplet based liquid bearing supporting a rotary micromotor that improves the operating characteristics of MEMS rotary motors. The liquid bearing provides wear-free, low-friction, passive alignment between the rotor and stator. Droplets are positioned relative to the rotor and stator through patterned superhydrophobic and hydrophilic surface coatings. The liquid bearing consists of a central droplet that acts as the motor shaft, providing axial alignment between rotor and stator, and satellite droplets, analogous to ball-bearings, that provide tip and tilt stable operation. The liquid bearing friction performance is characterized through measurement of the rotational drag coefficient and minimum starting torque due to stiction and geometric effects. Bearing operational performance is further characterized by modeling and measuring stiffness, environmental survivability, and high

  13. Correlations between histology and neuronal activity recorded by microelectrodes implanted chronically in the cerebral cortex

    Science.gov (United States)

    McCreery, Douglas; Cogan, Stuart; Kane, Sheryl; Pikov, Victor

    2016-06-01

    Objective. To quantify relations between the neuronal activity recorded with chronically-implanted intracortical microelectrodes and the histology of the surrounding tissue, using radial distance from the tip sites and time after array implantation as parameters. Approach. ‘Utah’-type intracortical microelectrode arrays were implanted into cats’ sensorimotor cortex for 275-364 days. The brain tissue around the implants was immuno-stained for the neuronal marker NeuN and for the astrocyte marker GFAP. Pearson’s product-moment correlations were used to quantify the relations between these markers and the amplitudes of the recorded neuronal action potentials (APs) and their signal-to-noise ratios (S/N). Main results. S/N was more stable over post-implant time than was AP amplitude, but its increased correlation with neuronal density after many months indicates ongoing loss of neurons around the microelectrodes. S/N was correlated with neuron density out to at least 140 μm from the microelectrodes, while AP amplitude was correlated with neuron density and GFAP density within ˜80 μm. Correlations between AP amplitude and histology markers (GFAP and NeuN density) were strongest immediately after implantation, while correlation between the neuron density and S/N was strongest near the time the animals were sacrificed. Unlike AP amplitude, there was no significant correlation between S/N and density of GFAP around the tip sites. Significance. Our findings indicate an evolving interaction between changes in the tissue surrounding the microelectrodes and the microelectrode’s electrical properties. Ongoing loss of neurons around recording microelectrodes, and the interactions between their delayed electrical deterioration and early tissue scarring around the tips appear to pose the greatest threats to the microelectrodes’ long-term functionality.

  14. Strain response of stretchable micro-electrodes: Controlling sensitivity with serpentine designs and encapsulation

    International Nuclear Information System (INIS)

    Gutruf, Philipp; Walia, Sumeet; Nur Ali, Md; Sriram, Sharath; Bhaskaran, Madhu

    2014-01-01

    The functionality of flexible electronics relies on stable performance of thin film micro-electrodes. This letter investigates the behavior of gold thin films on polyimide, a prevalent combination in flexible devices. The dynamic behavior of gold micro-electrodes has been studied by subjecting them to stress while monitoring their resistance in situ. The shape of the electrodes was systematically varied to examine resistive strain sensitivity, while an additional encapsulation was applied to characterize multilayer behavior. The realized designs show remarkable tolerance to repetitive strain, demonstrating that curvature and encapsulation are excellent approaches for minimizing resistive strain sensitivity to enable durable flexible electronics

  15. Surface-modified microelectrode array with flake nanostructure for neural recording and stimulation

    Energy Technology Data Exchange (ETDEWEB)

    Kim, Ju-Hyun; Choi, Yang-Kyu [Nano-Oriented Bio-Electronics Lab, Department of Electrical Engineering, College of Information Science and Technology, KAIST, Daejeon 305-701 (Korea, Republic of); Kang, Gyumin; Nam, Yoonkey, E-mail: ynam@kaist.ac.kr, E-mail: ykchoi@ee.kaist.ac.kr [Department of Bio and Brain Engineering, KAIST, KAIST Institute for Nano-Century, Daejeon 305-701 (Korea, Republic of)

    2010-02-26

    A novel microelectrode modification method is reported for neural electrode engineering with a flake nanostructure (nanoflake). The nanoflake-modified electrodes are fabricated by combining conventional lithography and electrochemical deposition to implement a microelectrode array (MEA) on a glass substrate. The unique geometrical properties of nanoflake sharp tips and valleys are studied by optical, electrochemical and electrical methods in order to verify the advantages of using nanoflakes for neural recording devices. The in vitro recording and stimulation of cultured hippocampal neurons are demonstrated on the nanoflake-modified MEA and the clear action potentials are observed due to the nanoflake impedance reduction effect.

  16. Fast prototyping of conducting polymer microelectrodes using resistance-controlled high precision drilling

    DEFF Research Database (Denmark)

    Kafka, Jan Robert; Geschke, Oliver; Skaarup, Steen

    2011-01-01

    We present a straightforward method for fast prototyping of microelectrode arrays in the highly conductive polymer poly(3,4-ethylenedioxythiophene) (PEDOT). Microelectrode arrays were produced by electrical resistance-controlled microdrilling through an insulating polymer layer (TOPAS® 5013...... approach the steady state currents predicted from modeling, but at a much slower rate than expected. This is shown to be caused by the use of electroactive PEDOT electrodes. Subtraction of the latter contribution gives approach to steady state currents within a few seconds, which is in very good agreement...

  17. Microelectrode for energy and current control of nanotip field electron emitters

    International Nuclear Information System (INIS)

    Lüneburg, S.; Müller, M.; Paarmann, A.; Ernstorfer, R.

    2013-01-01

    Emerging experiments and applications in electron microscopy, holography, and diffraction benefit from miniaturized electron guns for compact experimental setups. We present a highly compact microelectrode integrated field emitter that consists of a tungsten nanotip coated with a few micrometers thick polyimide film followed by a several nanometers thick gold film, both positioned behind the exposed emitter apex by approximately 10–30 μm. The control of the electric field strength at the nanometer scale tip apex allows suppression, extraction, and energy tuning of field-emitted electrons. The performance of the microelectrode is demonstrated experimentally and supported by numerical simulations

  18. Sandia Agile MEMS Prototyping, Layout Tools, Education and Services Program

    Energy Technology Data Exchange (ETDEWEB)

    Schriner, H.; Davies, B.; Sniegowski, J.; Rodgers, M.S.; Allen, J.; Shepard, C.

    1998-05-01

    Research and development in the design and manufacture of Microelectromechanical Systems (MEMS) is growing at an enormous rate. Advances in MEMS design tools and fabrication processes at Sandia National Laboratories` Microelectronics Development Laboratory (MDL) have broadened the scope of MEMS applications that can be designed and manufactured for both military and commercial use. As improvements in micromachining fabrication technologies continue to be made, MEMS designs can become more complex, thus opening the door to an even broader set of MEMS applications. In an effort to further research and development in MEMS design, fabrication, and application, Sandia National Laboratories has launched the Sandia Agile MEMS Prototyping, Layout Tools, Education and Services Program or SAMPLES program. The SAMPLES program offers potential partners interested in MEMS the opportunity to prototype an idea and produce hardware that can be used to sell a concept. The SAMPLES program provides education and training on Sandia`s design tools, analysis tools and fabrication process. New designers can participate in the SAMPLES program and design MEMS devices using Sandia`s design and analysis tools. As part of the SAMPLES program, participants` designs are fabricated using Sandia`s 4 level polycrystalline silicon surface micromachine technology fabrication process known as SUMMiT (Sandia Ultra-planar, Multi-level MEMS Technology). Furthermore, SAMPLES participants can also opt to obtain state of the art, post-fabrication services provided at Sandia such as release, packaging, reliability characterization, and failure analysis. This paper discusses the components of the SAMPLES program.

  19. Uncertainty quantification in capacitive RF MEMS switches

    Science.gov (United States)

    Pax, Benjamin J.

    Development of radio frequency micro electrical-mechanical systems (RF MEMS) has led to novel approaches to implement electrical circuitry. The introduction of capacitive MEMS switches, in particular, has shown promise in low-loss, low-power devices. However, the promise of MEMS switches has not yet been completely realized. RF-MEMS switches are known to fail after only a few months of operation, and nominally similar designs show wide variability in lifetime. Modeling switch operation using nominal or as-designed parameters cannot predict the statistical spread in the number of cycles to failure, and probabilistic methods are necessary. A Bayesian framework for calibration, validation and prediction offers an integrated approach to quantifying the uncertainty in predictions of MEMS switch performance. The objective of this thesis is to use the Bayesian framework to predict the creep-related deflection of the PRISM RF-MEMS switch over several thousand hours of operation. The PRISM switch used in this thesis is the focus of research at Purdue's PRISM center, and is a capacitive contacting RF-MEMS switch. It employs a fixed-fixed nickel membrane which is electrostatically actuated by applying voltage between the membrane and a pull-down electrode. Creep plays a central role in the reliability of this switch. The focus of this thesis is on the creep model, which is calibrated against experimental data measured for a frog-leg varactor fabricated and characterized at Purdue University. Creep plasticity is modeled using plate element theory with electrostatic forces being generated using either parallel plate approximations where appropriate, or solving for the full 3D potential field. For the latter, structure-electrostatics interaction is determined through immersed boundary method. A probabilistic framework using generalized polynomial chaos (gPC) is used to create surrogate models to mitigate the costly full physics simulations, and Bayesian calibration and forward

  20. MEMS for Tunable Photonic Metamaterial Applications

    Science.gov (United States)

    Stark, Thomas

    Photonic metamaterials are materials whose optical properties are derived from artificially-structured sub-wavelength unit cells, rather than from the bulk properties of the constituent materials. Examples of metamaterials include plasmonic materials, negative index materials, and electromagnetic cloaks. While advances in simulation tools and nanofabrication methods have allowed this field to grow over the past several decades, many challenges still exist. This thesis addresses two of these challenges: fabrication of photonic metamaterials with tunable responses and high-throughput nanofabrication methods for these materials. The design, fabrication, and optical characterization of a microelectromechanical systems (MEMS) tunable plasmonic spectrometer are presented. An array of holes in a gold film, with plasmon resonance in the mid-infrared, is suspended above a gold reflector, forming a Fabry-Perot interferometer of tunable length. The spectra exhibit the convolution of extraordinary optical transmission through the holes and Fabry-Perot resonances. Using MEMS, the interferometer length is modulated from 1.7 mum to 21.67 mum , thereby tuning the free spectral range from about 2900 wavenumbers to 230.7 wavenumbers and shifting the reflection minima and maxima across the infrared. Due to its broad spectral tunability in the fingerprint region of the mid-infrared, this device shows promise as a tunable biological sensing device. To address the issue of high-throughput, high-resolution fabrication of optical metamaterials, atomic calligraphy, a MEMS-based dynamic stencil lithography technique for resist-free fabrication of photonic metamaterials on unconventional substrates, has been developed. The MEMS consists of a moveable stencil, which can be actuated with nanometer precision using electrostatic comb drive actuators. A fabrication method and flip chip method have been developed, enabling evaporation of metals through the device handle for fabrication on an

  1. Specification for movable manipulator system for use in radiochemical engineering cells

    International Nuclear Information System (INIS)

    Dixson, G.E.

    1998-01-01

    This specification was prepared to identify requirements for a movable manipulator for use in B-Ccl 1 and the REC Airlock at 324 Building. This manipulator could also be used in other hot cells at the 324 Building. This work involves retrieval, inspection, reduction and decontamination of material on the Airlock and Cell floors, in the pipe trench and on the walls. B and W Hanford Company (BWHC) recognizes that not all of the requirements are compatible and some may need to be changed, subject to agreement between the parties involved. BWHC also recognizes that in order to perform the tasks described two or more different machines with significantly different layout may be necessary. These requirements are the starting point for any proposal

  2. High magnetic field uniformity superconducting magnet for a movable polarized target

    International Nuclear Information System (INIS)

    Anishchenko, N.G.; Bartenev, V.D.; Blinov, N.A.

    1998-01-01

    The superconducting polarizing magnet was constructed for movable polarized target (MPT) with working volume 200 mm long and 30 mm in diameter. The magnet provides a polarizing magnetic field up to 6 T with the uniformity of 4.5 x 10 -4 in the working volume of the target. The magnet windings are made of a NbTi wire, impregnated with the epoxy resin and placed in the horizontal cryostat with 'warm' aperture diameter of 96 mm. The design and technology of the magnet winding are described. Results of the magnetic field map measurements using a NMR-magnetometer are given. The MPT set-up is installed in the beam line of polarized neutrons produced by break-up of polarized deuterons extracted from the Synchrophasotron of the Laboratory of High Energies (LHE), JINR, Dubna

  3. Delay time in a single barrier for a movable quantum shutter

    International Nuclear Information System (INIS)

    Hernandez, Alberto

    2010-01-01

    The transient solution and delay time for a δ potential scatterer with a movable quantum shutter is calculated by solving analytically the time-dependent Schroedinger equation. The delay time is analyzed as a function of the distance between the shutter and the potential barrier and also as a function of the distance between the potential barrier and the detector. In both cases, it is found that the delay time exhibits a dynamical behavior and that it tends to a saturation value Δt sat in the limit of very short distances, which represents the maximum delay produced by the potential barrier near the interaction region. The phase time τ θ , on the other hand, is not an appropriate time scale for measuring the time delay near the interaction region, except if the shutter is moved far away from the potential. The role played by the antibound state of the system on the behavior of the delay time is also discussed.

  4. Quantum limits of photothermal and radiation pressure cooling of a movable mirror

    International Nuclear Information System (INIS)

    Pinard, M; Dantan, A

    2008-01-01

    We present a general quantum-mechanical theory for the cooling of a movable mirror in an optical cavity when both radiation pressure self-cooling and photothermal cooling effects are present, and show that these two mechanisms may bring the oscillator close to its quantum ground state, although in quite different regimes. Self-cooling caused by coherent exchange of excitations between the cavity mode and the mirror vibrational mode is shown to dominate in the good-cavity regime-when the mechanical resonance frequency is larger than the cavity decay rate, whereas photothermal-induced cooling can be made predominant in the bad-cavity limit. Both situations are compared, and the relevant physical quantities to be optimized in order to reach the lowest final excitation number states are extracted.

  5. Method and system having ultrasonic sensor movable by translation device for ultrasonic profiling of weld samples

    Science.gov (United States)

    Panyard, James; Potter, Timothy; Charron, William; Hopkins, Deborah; Reverdy, Frederic

    2010-04-06

    A system for ultrasonic profiling of a weld sample includes a carriage movable in opposite first and second directions. An ultrasonic sensor is coupled to the carriage to move over the sample as the carriage moves. An encoder determines the position of the carriage to determine the position of the sensor. A spring is connected at one end of the carriage. Upon the carriage being moved in the first direction toward the spring such that the carriage and the sensor are at a beginning position and the spring is compressed the spring decompresses to push the carriage back along the second direction to move the carriage and the sensor from the beginning position to an ending position. The encoder triggers the sensor to take the ultrasonic measurements of the sample when the sensor is at predetermined positions while the sensor moves over the sample between the beginning and positions.

  6. 3D simulation of friction stir welding based on movable cellular automaton method

    Science.gov (United States)

    Eremina, Galina M.

    2017-12-01

    The paper is devoted to a 3D computer simulation of the peculiarities of material flow taking place in friction stir welding (FSW). The simulation was performed by the movable cellular automaton (MCA) method, which is a representative of particle methods in mechanics. Commonly, the flow of material in FSW is simulated based on computational fluid mechanics, assuming the material as continuum and ignoring its structure. The MCA method considers a material as an ensemble of bonded particles. The rupture of interparticle bonds and the formation of new bonds enable simulations of crack nucleation and healing as well as mas mixing and microwelding. The simulation results showed that using pins of simple shape (cylinder, cone, and pyramid) without a shoulder results in small displacements of plasticized material in workpiece thickness directions. Nevertheless, the optimal ratio of longitudinal velocity to rotational speed makes it possible to transport the welded material around the pin several times and to produce a joint of good quality.

  7. Construction and Initial Validation of the Multiracial Experiences Measure (MEM)

    Science.gov (United States)

    Yoo, Hyung Chol; Jackson, Kelly; Guevarra, Rudy P.; Miller, Matthew J.; Harrington, Blair

    2015-01-01

    This article describes the development and validation of the Multiracial Experiences Measure (MEM): a new measure that assesses uniquely racialized risks and resiliencies experienced by individuals of mixed racial heritage. Across two studies, there was evidence for the validation of the 25-item MEM with 5 subscales including Shifting Expressions, Perceived Racial Ambiguity, Creating Third Space, Multicultural Engagement, and Multiracial Discrimination. The 5-subscale structure of the MEM was supported by a combination of exploratory and confirmatory factor analyses. Evidence of criterion-related validity was partially supported with MEM subscales correlating with measures of racial diversity in one’s social network, color-blind racial attitude, psychological distress, and identity conflict. Evidence of discriminant validity was supported with MEM subscales not correlating with impression management. Implications for future research and suggestions for utilization of the MEM in clinical practice with multiracial adults are discussed. PMID:26460977

  8. APPROACHES FOR STABILIZING OF BIPED ROBOTS IN A STANDING POSITION ON MOVABLE SUPPORT

    Directory of Open Access Journals (Sweden)

    D. N. Bazylev

    2015-05-01

    Full Text Available Subject of research. The problem of stabilization for biped walking robots on the surface is considered. The angle and angular velocity of the movable surface varies randomly in a limited range. Methods. Two approaches of stabilization of biped robots are proposed. The first approach requires the construction of kinematic and dynamic models of the robot. Dynamic equations were obtained using the Euler-Lagrange method. The control algorithm is based on the method of inverse dynamics, in which the original nonlinear dynamic model is linearized by a feedback. The second stabilization algorithm uses only the kinematic model of the robot. A hybrid controller is developed for this approach. In the case of low angular velocities of the movable support the robot stabilization is performed by PD controller on the basis of the angle error of deflection of the servo shaft. In the case of relatively high angular velocities of the support the controller also uses the gyroscope readings mounted in the robot torso. Maintenance of the robot’s gravity center over the center of bearing area for providing a stable position was chosen as a goal of control in both approaches. Main results. Efficiency and effectiveness of the proposed approaches for stabilization of biped robots on the moving surface are demonstrated by the numerical simulation. Both methods provide stability of the balancing robots on changing the angle of inclination and angular velocity of the moving surface in the ranges (50; 50 and (40 / sec; 40 / sec , respectively. Comparative analysis of these approaches under identical requirements for quality indicators of transients is also provided: transient time 0.2 sec п t  and overshoot   0%. The conditions under which each of the control methods will be more effective in practice are identified.

  9. Giant piezoelectricity on Si for hyperactive MEMS.

    Science.gov (United States)

    Baek, S H; Park, J; Kim, D M; Aksyuk, V A; Das, R R; Bu, S D; Felker, D A; Lettieri, J; Vaithyanathan, V; Bharadwaja, S S N; Bassiri-Gharb, N; Chen, Y B; Sun, H P; Folkman, C M; Jang, H W; Kreft, D J; Streiffer, S K; Ramesh, R; Pan, X Q; Trolier-McKinstry, S; Schlom, D G; Rzchowski, M S; Blick, R H; Eom, C B

    2011-11-18

    Microelectromechanical systems (MEMS) incorporating active piezoelectric layers offer integrated actuation, sensing, and transduction. The broad implementation of such active MEMS has long been constrained by the inability to integrate materials with giant piezoelectric response, such as Pb(Mg(1/3)Nb(2/3))O(3)-PbTiO(3) (PMN-PT). We synthesized high-quality PMN-PT epitaxial thin films on vicinal (001) Si wafers with the use of an epitaxial (001) SrTiO(3) template layer with superior piezoelectric coefficients (e(31,f) = -27 ± 3 coulombs per square meter) and figures of merit for piezoelectric energy-harvesting systems. We have incorporated these heterostructures into microcantilevers that are actuated with extremely low drive voltage due to thin-film piezoelectric properties that rival bulk PMN-PT single crystals. These epitaxial heterostructures exhibit very large electromechanical coupling for ultrasound medical imaging, microfluidic control, mechanical sensing, and energy harvesting.

  10. Active mems microbeam device for gas detection

    KAUST Repository

    Bouchaala, Adam M.

    2017-10-05

    Sensors and active switches for applications in gas detection and other fields are described. The devices are based on the softening and hardening nonlinear response behaviors of microelectromechanical systems (MEMS) clamped-clamped microbeams. In that context, embodiments of gas-triggered MEMS microbeam sensors and switches are described. The microbeam devices can be coated with a Metal-Organic Framework to achieve high sensitivity. For gas sensing, an amplitude-based tracking algorithm can be used to quantify an amount of gas captured by the devices according to frequency shift. Noise analysis is also conducted according to the embodiments, which shows that the microbeam devices have high stability against thermal noise. The microbeam devices are also suitable for the generation of binary sensing information for alarming, for example.

  11. Enabling MEMS technologies for communications systems

    Science.gov (United States)

    Lubecke, Victor M.; Barber, Bradley P.; Arney, Susanne

    2001-11-01

    Modern communications demands have been steadily growing not only in size, but sophistication. Phone calls over copper wires have evolved into high definition video conferencing over optical fibers, and wireless internet browsing. The technology used to meet these demands is under constant pressure to provide increased capacity, speed, and efficiency, all with reduced size and cost. Various MEMS technologies have shown great promise for meeting these challenges by extending the performance of conventional circuitry and introducing radical new systems approaches. A variety of strategic MEMS structures including various cost-effective free-space optics and high-Q RF components are described, along with related practical implementation issues. These components are rapidly becoming essential for enabling the development of progressive new communications systems technologies including all-optical networks, and low cost multi-system wireless terminals and basestations.

  12. MEMS Gyroscopes Based on Acoustic Sagnac Effect

    Directory of Open Access Journals (Sweden)

    Yuanyuan Yu

    2016-12-01

    Full Text Available This paper reports on the design, fabrication and preliminary test results of a novel microelectromechanical systems (MEMS device—the acoustic gyroscope. The unique operating mechanism is based on the “acoustic version” of the Sagnac effect in fiber-optic gyros. The device measures the phase difference between two sound waves traveling in opposite directions, and correlates the signal to the angular velocity of the hosting frame. As sound travels significantly slower than light and develops a larger phase change within the same path length, the acoustic gyro can potentially outperform fiber-optic gyros in sensitivity and form factor. It also promises superior stability compared to vibratory MEMS gyros as the design contains no moving parts and is largely insensitive to mechanical stress or temperature. We have carried out systematic simulations and experiments, and developed a series of processes and design rules to implement the device.

  13. Electroplating of low stress permalloy for MEMS

    International Nuclear Information System (INIS)

    Zhang Yonghua; Ding Guifu; Cai Yuli; Wang Hong; Cai Bingchu

    2006-01-01

    With the wafer-bending method and spectrophotometry, the internal stress in electroplated Ni-Fe alloy for MEMS has been investigated as a function of bath concentration. This investigation demonstrated that low concentration plating solution is useful for the decrease of the residual stress in the electrodeposits, and the stress could further decrease with an increase of saccharin additive content. And the change of stress from tensile to compressive was not observed with the increase of the additive content in plating path. The low stress permalloy (Ni 81 Fe 19 ) was reached in our experimental conditions. A bistable electromagnetic RF MEMS switch with deformation-free bilayer cantilever beam was fabricated successfully by electroplated permalloy

  14. SOI silicon on glass for optical MEMS

    DEFF Research Database (Denmark)

    Larsen, Kristian Pontoppidan; Ravnkilde, Jan Tue; Hansen, Ole

    2003-01-01

    and a final sealing at the interconnects can be performed using a suitable polymer. Packaged MEMS on glass are advantageous within Optical MEMS and for sensitive capacitive devices. We report on experiences with bonding SOI to Pyrex. Uniform DRIE shallow and deep etching was achieved by a combination......A newly developed fabrication method for fabrication of single crystalline Si (SCS) components on glass, utilizing Deep Reactive Ion Etching (DRIE) of a Silicon On Insulator (SOI) wafer is presented. The devices are packaged at wafer level in a glass-silicon-glass (GSG) stack by anodic bonding...... of an optimized device layout and an optimized process recipe. The behavior of the buried oxide membrane when used as an etch stop for the through-hole etch is described. No harmful buckling or fracture of the membrane is observed for an oxide thickness below 1 μm, but larger and more fragile released structures...

  15. Quantitative Accelerated Life Testing of MEMS Accelerometers.

    Science.gov (United States)

    Bâzu, Marius; Gălăţeanu, Lucian; Ilian, Virgil Emil; Loicq, Jerome; Habraken, Serge; Collette, Jean-Paul

    2007-11-20

    Quantitative Accelerated Life Testing (QALT) is a solution for assessing thereliability of Micro Electro Mechanical Systems (MEMS). A procedure for QALT is shownin this paper and an attempt to assess the reliability level for a batch of MEMSaccelerometers is reported. The testing plan is application-driven and contains combinedtests: thermal (high temperature) and mechanical stress. Two variants of mechanical stressare used: vibration (at a fixed frequency) and tilting. Original equipment for testing at tiltingand high temperature is used. Tilting is appropriate as application-driven stress, because thetilt movement is a natural environment for devices used for automotive and aerospaceapplications. Also, tilting is used by MEMS accelerometers for anti-theft systems. The testresults demonstrated the excellent reliability of the studied devices, the failure rate in the"worst case" being smaller than 10 -7 h -1 .

  16. Melancolia, memória e subjetividade

    OpenAIRE

    Giele Rocha Dorneles

    2015-01-01

    A proposta desta tese é estabelecer, através de uma perspectiva comparatista, relações entre três temas articuladores: a melancolia, a memória e a subjetividade, de modo a constituir entrelaçamentos possíveis, além de buscar indicar o modo como essas três temáticas são apresentadas e representadas em diferentes formas de expressão das artes, partindo de obras literárias - como “A maior flor do mundo” e “As pequenas memórias”, entre outras de José Saramago, e de autores como Charles Baudelaire...

  17. Selective wetting-induced micro-electrode patterning for flexible micro-supercapacitors.

    Science.gov (United States)

    Kim, Sung-Kon; Koo, Hyung-Jun; Lee, Aeri; Braun, Paul V

    2014-08-13

    Selective wetting-induced micro-electrode patterning is used to fabricate flexible micro-supercapacitors (mSCs). The resulting mSCs exhibit high performance, mechanical stability, stable cycle life, and hold great promise for facile integration into flexible devices requiring on-chip energy storage. © 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

  18. Intraneural stimulation using wire-microelectrode arrays: analysis of force steps in recruitment curves

    NARCIS (Netherlands)

    Smit, J.P.A.; Rutten, Wim; Boom, H.B.K.

    1996-01-01

    In acute experiments on six Wistar rats, a wire-microelectrode array was inserted into the common peroneal nerve. A 5-channel array and a 24-channel array were available. Each electrode in the array was used to generate a twitch contraction force recruitment curve for the extensor digitorum longus

  19. Piezoelectric translator. A simple and inexpensive device to move microelectrodes and micropipettes small distances rapidly.

    Science.gov (United States)

    Lederer, W J

    1983-09-01

    A device is described that is capable of rapidly moving microelectrodes and micropipettes over distances up to 15 mu. This piezoelectric transLator uses the diaphragm from virtually any available piezoelectric buzzer in combination with simple physical support and drive electronics. All of the necessary details for the construction of this small device are presented. Each finished unit is about 2 cm long with a diameter of 2 cm and can be readily adapted to existing manipulators. The translator has been found useful in aiding the independent penetration by one or more microelectrodes of single cells or of more complicated multicellular preparations (including those that lie behind a connective tissue layer). This new device offers fine control of microelectrode motion that cannot be obtained by the other methods used to aid microelectrode and micropipette penetration of cell membranes (e.g. capacitance overcompensation--"ringing in"' or "tickling"--or tapping the manipulator base). Finally, the device described in this paper is extremely simple and inexpensive to build.

  20. Performance Improvement by Layout Designs of Conductive Polymer Microelectrode Based Impedimetric Biosensors

    DEFF Research Database (Denmark)

    Rosati, Giulio; Daprà, Johannes; Cherré, Solène

    2014-01-01

    In this work we present a theoretical, computational, and experimental evaluation of the performance of an impedimetric biosensor based on interdigitated conductive polymer (PEDOT:TsO) microelectrodes in a microfluidic system. The influence of the geometry of the electrodes and microchannels on t...

  1. All-diamond functional surface micro-electrode arrays for brain-slice neural analysis

    Czech Academy of Sciences Publication Activity Database

    Vahidpour, F.; Curley, L.; Biró, I.; McDonald, M.; Croux, D.; Pobedinskas, P.; Haenen, K.; Giugliano, M.; Vlčková Živcová, Zuzana; Kavan, Ladislav; Nesládek, M.

    2017-01-01

    Roč. 214, č. 2 (2017), č. článku 1532347. ISSN 1862-6300 R&D Projects: GA ČR GA13-31783S Institutional support: RVO:61388955 Keywords : impedance spectroscopy * microelectrode arrays * surface termination Subject RIV: CG - Electrochemistry OBOR OECD: Electrochemistry (dry cells, batteries, fuel cells, corrosion metals, electrolysis) Impact factor: 1.775, year: 2016

  2. Investigation of parameters controlling the dielectrophoretic assembly of carbon nanotubes on microelectrodes

    DEFF Research Database (Denmark)

    Dimaki, Maria; Bøggild, Peter

    2008-01-01

    Networks of single-walled carbon nanotubes were assembled onto microelectrodes by dielectrophoresis. The dependence of the obtained networks on several assembly parameters such as bias voltage, field application time, frequency, electrode geometry and the nanotube solvent were investigated both s...

  3. A nanoporous alumina microelectrode array for functional cell–chip coupling

    International Nuclear Information System (INIS)

    Wesche, Manuel; Hüske, Martin; Yakushenko, Alexey; Brüggemann, Dorothea; Mayer, Dirk; Offenhäusser, Andreas; Wolfrum, Bernhard

    2012-01-01

    The design of electrode interfaces has a strong impact on cell-based bioelectronic applications. We present a new type of microelectrode array chip featuring a nanoporous alumina interface. The chip is fabricated in a combination of top-down and bottom-up processes using state-of-the-art clean room technology and self-assembled generation of nanopores by aluminum anodization. The electrode characteristics are investigated in phosphate buffered saline as well as under cell culture conditions. We show that the modified microelectrodes exhibit decreased impedance compared to planar microelectrodes, which is caused by a nanostructuring effect of the underlying gold during anodization. The stability and biocompatibility of the device are demonstrated by measuring action potentials from cardiomyocyte-like cells growing on top of the chip. Cross sections of the cell–surface interface reveal that the cell membrane seals the nanoporous alumina layer without bending into the sub-50 nm apertures. The nanoporous microelectrode array device may be used as a platform for combining extracellular recording of cell activity with stimulating topographical cues. (paper)

  4. Characterization of Early Cortical Neural Network Development in Multiwell Microelectrode Array Plates

    Science.gov (United States)

    We examined the development of neural network activity using microelectrode array (MEA) recordings made in multi-well MEA plates (mwMEAs) over the first 12 days in vitro (DIV). In primary cortical cultures made from postnatal rats, action potential spiking activity was essentiall...

  5. Impedance measurements on Au microelectrodes using controlled atmosphere high temperature scanning probe microscope

    DEFF Research Database (Denmark)

    Wu, Yuehua; Hansen, Karin Vels; Jacobsen, Torben

    2011-01-01

    High temperature impedance measurements on Au microelectrodes deposited on polished yttria stabilized zirconia (YSZ) pellets were demonstrated using a newly designed controlled atmosphere high temperature scanning probe microscope (CAHT-SPM). Probes based on Pt0.8Ir0.2 were fabricated and employed...

  6. On the Stiction of MEMS Materials

    DEFF Research Database (Denmark)

    Zhuang, Yanxin; Menon, Aric Kumaran

    2005-01-01

    energies and stiction of commonly used MEMS materials by contact angle measurements and atomic force microscopy (AFM). Dispersive and polar components of surface energies are calculated by Owens-Wendt-Rabel-Kaelble method. Silicon and silicon-related materials have higher polar surface energies than SU-8...... been shown that the materials with higher surface energy have higher sticton/adhesion forces. The topography of surface influences the contact angle and stiction, and is also discussed in the paper....

  7. Characterization of Piezoelectric Energy Harvesting MEMS

    Science.gov (United States)

    2015-12-01

    of previously fabricated MEMS piezoelectric energy harvesters and use the results to optimize an advanced finite element model to be used in...possibilities of using solar power and the piezoelectric effect to harvest energy [12]. The design goal was to develop an energy harvester with a resonant... The piezoelectric properties of AlN are also relatively constant over a wide range of temperatures [7]. AlN was further characterized

  8. Fractal Structures For Fixed Mems Capacitors

    KAUST Repository

    Elshurafa, Amro M.

    2014-08-28

    An embodiment of a fractal fixed capacitor comprises a capacitor body in a microelectromechanical system (MEMS) structure. The capacitor body has a first plate with a fractal shape separated by a horizontal distance from a second plate with a fractal shape. The first plate and the second plate are within the same plane. Such a fractal fixed capacitor further comprises a substrate above which the capacitor body is positioned.

  9. Review on the Modeling of Electrostatic MEMS

    Directory of Open Access Journals (Sweden)

    Wan-Chun Chuang

    2010-06-01

    Full Text Available Electrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduces the physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices.

  10. Ultra-compact MEMS FTIR spectrometer

    Science.gov (United States)

    Sabry, Yasser M.; Hassan, Khaled; Anwar, Momen; Alharon, Mohamed H.; Medhat, Mostafa; Adib, George A.; Dumont, Rich; Saadany, Bassam; Khalil, Diaa

    2017-05-01

    Portable and handheld spectrometers are being developed and commercialized in the late few years leveraging the rapidly-progressing technology and triggering new markets in the field of on-site spectroscopic analysis. Although handheld devices were commercialized for the near-infrared spectroscopy (NIRS), their size and cost stand as an obstacle against the deployment of the spectrometer as spectral sensing components needed for the smart phone industry and the IoT applications. In this work we report a chip-sized microelectromechanical system (MEMS)-based FTIR spectrometer. The core optical engine of the solution is built using a passive-alignment integration technique for a selfaligned MEMS chip; self-aligned microoptics and a single detector in a tiny package sized about 1 cm3. The MEMS chip is a monolithic, high-throughput scanning Michelson interferometer fabricated using deep reactive ion etching technology of silicon-on-insulator substrate. The micro-optical part is used for conditioning the input/output light to/from the MEMS and for further light direction to the detector. Thanks to the all-reflective design of the conditioning microoptics, the performance is free of chromatic aberration. Complemented by the excellent transmission properties of the silicon in the infrared region, the integrated solution allows very wide spectral range of operation. The reported sensor's spectral resolution is about 33 cm-1 and working in the range of 1270 nm to 2700 nm; upper limited by the extended InGaAs detector. The presented solution provides a low cost, low power, tiny size, wide wavelength range NIR spectral sensor that can be manufactured with extremely high volumes. All these features promise the compatibility of this technology with the forthcoming demand of smart portable and IoT devices.

  11. Different grades MEMS accelerometers error characteristics

    Science.gov (United States)

    Pachwicewicz, M.; Weremczuk, J.

    2017-08-01

    The paper presents calibration effects of two different MEMS accelerometers of different price and quality grades and discusses different accelerometers errors types. The calibration for error determining is provided by reference centrifugal measurements. The design and measurement errors of the centrifuge are discussed as well. It is shown that error characteristics of the sensors are very different and it is not possible to use simple calibration methods presented in the literature in both cases.

  12. High temperature stable RF MEMS microwave switches

    OpenAIRE

    Klein, Stefan

    2010-01-01

    Im Rahmen dieser Arbeit wurden elektrostatisch angesteuerte RF-MEMS Schalter mit kapazitiver Kopplung entwickelt, die Prozesstemperaturen von 400°C und darüber hinaus ohne Verlust der Funktionstüchtigkeit überstehen. Als Funktionsmaterial wird einerseits eine AlSiCu und andererseits eine WTi Legierung verwendet. Das Schalterprinzip beruht auf dem Wanderkeileffekt, der einen gekrümmten Biegebalken nutzt. Diese Verbiegung weg von der Substratoberfläche, die durch einen wohldefinierten intri...

  13. Fractal Structures For Fixed Mems Capacitors

    KAUST Repository

    Elshurafa, Amro M.; Radwan, Ahmed Gomaa Ahmed; Emira, Ahmed A.; Salama, Khaled N.

    2014-01-01

    An embodiment of a fractal fixed capacitor comprises a capacitor body in a microelectromechanical system (MEMS) structure. The capacitor body has a first plate with a fractal shape separated by a horizontal distance from a second plate with a fractal shape. The first plate and the second plate are within the same plane. Such a fractal fixed capacitor further comprises a substrate above which the capacitor body is positioned.

  14. Using MEMS Capacitive Switches in Tunable RF Amplifiers

    OpenAIRE

    Danson John; Plett Calvin; Tait Niall

    2006-01-01

    A MEMS capacitive switch suitable for use in tunable RF amplifiers is described. A MEMS switch is designed, fabricated, and characterized with physical and RF measurements for inclusion in simulations. Using the MEMS switch models, a dual-band low-noise amplifier (LNA) operating at GHz and GHz, and a tunable power amplifier (PA) at GHz are simulated in m CMOS. MEMS switches allow the LNA to operate with 11 dB of isolation between the two bands while maintaining dB of gain and sub- dB no...

  15. Investigating ESD sensitivity in electrostatic SiGe MEMS

    International Nuclear Information System (INIS)

    Sangameswaran, Sandeep; De Coster, Jeroen; Linten, Dimitri; Scholz, Mirko; Thijs, Steven; Groeseneken, Guido; De Wolf, Ingrid

    2010-01-01

    The sensitivity of electrostatically actuated SiGe microelectromechanical systems to electrostatic discharge events has been investigated in this paper. Torsional micromirrors and RF microelectromechanical systems (MEMS) actuators have been used as two case studies to perform this study. On-wafer electrostatic discharge (ESD) measurement methods, such as the human body model (HBM) and machine model (MM), are discussed. The impact of HBM ESD zap tests on the functionality and behavior of MEMS is explained and the ESD failure levels of MEMS have been verified by failure analysis. It is demonstrated that electrostatic MEMS devices have a high sensitivity to ESD and that it is essential to protect them.

  16. A nuclear micro battery for Mems devices

    International Nuclear Information System (INIS)

    Lal, A.; Bilbao Y Leon, R.M.; Guo, H.; Li, H.; Santanam, S.; Yao, R.; Blanchard, J.; Henderson, D.

    2001-01-01

    Micro-electromechanical Systems (MEMS) have not gained wide use because they lack the on-device power required by many important applications. Several forms of energy could be considered to supply this needed power (solar, fossil fuels, etc), but nuclear sources provide an intriguing option in terms of power density and lifetime. This paper describes several approaches for establishing the viability of nuclear sources for powering realistic MEMS devices. Isotopes currently being used include alpha and low-energy beta emitters. The sources are in both solid and liquid form, and a technique for plating a solid source from a liquid source has been investigated. Several approaches are being explored for the production of MEMS power sources. The first concept is a junction-type battery. The second concept involves a more direct use of the charged particles produced by the decay: the creation of a resonator by inducing movement due to attraction or repulsion resulting from the collection of charged particles. Performance results are provided for each of these concepts. (authors)

  17. Heterogeneous MEMS device assembly and integration

    Science.gov (United States)

    Topart, Patrice; Picard, Francis; Ilias, Samir; Alain, Christine; Chevalier, Claude; Fisette, Bruno; Paultre, Jacques E.; Généreux, Francis; Legros, Mathieu; Lepage, Jean-François; Laverdière, Christian; Ngo Phong, Linh; Caron, Jean-Sol; Desroches, Yan

    2014-03-01

    In recent years, smart phone applications have both raised the pressure for cost and time to market reduction, and the need for high performance MEMS devices. This trend has led the MEMS community to develop multi-die packaging of different functionalities or multi-technology (i.e. wafer) approaches to fabricate and assemble devices respectively. This paper reports on the fabrication, assembly and packaging at INO of various MEMS devices using heterogeneous assembly at chip and package-level. First, the performance of a giant (e.g. about 3 mm in diameter), electrostatically actuated beam steering mirror is presented. It can be rotated about two perpendicular axes to steer an optical beam within an angular cone of up to 60° in vector scan mode with an angular resolution of 1 mrad and a response time of 300 ms. To achieve such angular performance relative to mirror size, the microassembly was performed from sub-components fabricated from 4 different wafers. To combine infrared detection with inertial sensing, an electroplated proof mass was flip-chipped onto a 256×1 pixel uncooled bolometric FPA and released using laser ablation. In addition to the microassembly technology, performance results of packaged devices are presented. Finally, to simulate a 3072×3 pixel uncooled detector for cloud and fire imaging in mid and long-wave IR, the staggered assembly of six 512×3 pixel FPAs with a less than 50 micron pixel co-registration is reported.

  18. MEMS Micro-Valve for Space Applications

    Science.gov (United States)

    Chakraborty, I.; Tang, W. C.; Bame, D. P.; Tang, T. K.

    1998-01-01

    We report on the development of a Micro-ElectroMechanical Systems (MEMS) valve that is designed to meet the rigorous performance requirements for a variety of space applications, such as micropropulsion, in-situ chemical analysis of other planets, or micro-fluidics experiments in micro-gravity. These systems often require very small yet reliable silicon valves with extremely low leak rates and long shelf lives. Also, they must survive the perils of space travel, which include unstoppable radiation, monumental shock and vibration forces, as well as extreme variations in temperature. Currently, no commercial MEMS valve meets these requirements. We at JPL are developing a piezoelectric MEMS valve that attempts to address the unique problem of space. We begin with proven configurations that may seem familiar. However, we have implemented some major design innovations that should produce a superior valve. The JPL micro-valve is expected to have an extremely low leak rate, limited susceptibility to particulates, vibration or radiation, as well as a wide operational temperature range.

  19. A MEMS sensor for microscale force measurements

    International Nuclear Information System (INIS)

    Majcherek, S; Aman, A; Fochtmann, J

    2016-01-01

    This paper describes the development and testing of a new MEMS-based sensor device for microscale contact force measurements. A special MEMS cell was developed to reach higher lateral resolution than common steel-based load cells with foil-type strain gauges as mechanical-electrical converters. The design provided more than one normal force measurement point with spatial resolution in submillimeter range. Specific geometric adaption of the MEMS-device allowed adjustability of its measurement range between 0.5 and 5 N. The thin film nickel-chromium piezo resistors were used to achieve a mechanical-electrical conversion. The production process was realized by established silicon processing technologies such as deep reactive ion etching and vapor deposition (sputtering). The sensor was tested in two steps. Firstly, the sensor characteristics were carried out by application of defined loads at the measurement points by a push-pull tester. As a result, the sensor showed linear behavior. A measurement system analysis (MSA1) was performed to define the reliability of the measurement system. The measured force values had the maximal relative deviation of 1% to average value of 1.97 N. Secondly, the sensor was tested under near-industrial conditions. In this context, the thermal induced relaxation behavior of the electrical connector contact springs was investigated. The handling of emerging problems during the characterization process of the sensor is also described. (paper)

  20. Radioisotope Power Sources for MEMS Devices,

    International Nuclear Information System (INIS)

    Blanchard, J.P.

    2001-01-01

    Microelectromechanical systems (MEMS) comprise a rapidly expanding research field with potential applications varying from sensors in airbags to more recent optical applications. Depending on the application, these devices often require an on-board power source for remote operation, especially in cases requiring operation for an extended period of time. Previously suggested power sources include fossil fuels and solar energy, but nuclear power sources may provide significant advantages for certain applications. Hence, the objective of this study is to establish the viability of using radioisotopes to power realistic MEMS devices. A junction-type battery was constructed using silicon and a 63 Ni liquid source. A source volume containing 64 microCi provided a power of ∼0.07 nW. A more novel application of nuclear sources for MEMS applications involves the creation of a resonator that is driven by charge collection in a cantilever beam. Preliminary results have established the feasibility of this concept, and future work will optimize the design for various applications

  1. Implications of chronic daily anti-oxidant administration on the inflammatory response to intracortical microelectrodes

    Science.gov (United States)

    Potter-Baker, Kelsey A.; Stewart, Wade G.; Tomaszewski, William H.; Wong, Chun T.; Meador, William D.; Ziats, Nicholas P.; Capadona, Jeffrey R.

    2015-08-01

    Objective. Oxidative stress events have been implicated to occur and facilitate multiple failure modes of intracortical microelectrodes. The goal of the present study was to evaluate the ability of a sustained concentration of an anti-oxidant and to reduce oxidative stress-mediated neurodegeneration for the application of intracortical microelectrodes. Approach. Non-functional microelectrodes were implanted into the cortex of male Sprague Dawley rats for up to sixteen weeks. Half of the animals received a daily intraperitoneal injection of the natural anti-oxidant resveratrol, at 30 mg kg-1. The study was designed to investigate the biodistribution of the resveratrol, and the effects on neuroinflammation/neuroprotection following device implantation. Main results. Daily maintenance of a sustained range of resveratrol throughout the implantation period resulted in fewer degenerating neurons in comparison to control animals at both two and sixteen weeks post implantation. Initial and chronic improvements in neuronal viability in resveratrol-dosed animals were correlated with significant reductions in local superoxide anion accumulation around the implanted device at two weeks after implantation. Controls, receiving only saline injections, were also found to have reduced amounts of accumulated superoxide anion locally and less neurodegeneration than controls at sixteen weeks post-implantation. Despite observed benefits, thread-like adhesions were found between the liver and diaphragm in resveratrol-dosed animals. Significance. Overall, our chronic daily anti-oxidant dosing scheme resulted in improvements in neuronal viability surrounding implanted microelectrodes, which could result in improved device performance. However, due to the discovery of thread-like adhesions, further work is still required to optimize a chronic anti-oxidant dosing regime for the application of intracortical microelectrodes.

  2. A capacitive CMOS-MEMS sensor designed by multi-physics simulation for integrated CMOS-MEMS technology

    Science.gov (United States)

    Konishi, Toshifumi; Yamane, Daisuke; Matsushima, Takaaki; Masu, Kazuya; Machida, Katsuyuki; Toshiyoshi, Hiroshi

    2014-01-01

    This paper reports the design and evaluation results of a capacitive CMOS-MEMS sensor that consists of the proposed sensor circuit and a capacitive MEMS device implemented on the circuit. To design a capacitive CMOS-MEMS sensor, a multi-physics simulation of the electromechanical behavior of both the MEMS structure and the sensing LSI was carried out simultaneously. In order to verify the validity of the design, we applied the capacitive CMOS-MEMS sensor to a MEMS accelerometer implemented by the post-CMOS process onto a 0.35-µm CMOS circuit. The experimental results of the CMOS-MEMS accelerometer exhibited good agreement with the simulation results within the input acceleration range between 0.5 and 6 G (1 G = 9.8 m/s2), corresponding to the output voltages between 908.6 and 915.4 mV, respectively. Therefore, we have confirmed that our capacitive CMOS-MEMS sensor and the multi-physics simulation will be beneficial method to realize integrated CMOS-MEMS technology.

  3. Review of Automated Design and Optimization of MEMS

    DEFF Research Database (Denmark)

    Achiche, Sofiane; Fan, Zhun; Bolognini, Francesca

    2007-01-01

    carried out. This paper presents a review of these techniques. The design task of MEMS is usually divided into four main stages: System Level, Device Level, Physical Level and the Process Level. The state of the art o automated MEMS design in each of these levels is investigated....

  4. Buffering Implications for the Design Space of Streaming MEMS Storage

    NARCIS (Netherlands)

    Khatib, M.G.; Abelmann, Leon; Preas, Kathy

    2011-01-01

    Emerging nanotechnology-based systems encounter new non-functional requirements. This work addresses MEMS storage, an emerging technology that promises ultrahigh density and energy-efficient storage devices. We study the buffering requirement of MEMS storage in streaming applications. We show that

  5. Stability, Nonlinearity and Reliability of Electrostatically Actuated MEMS Devices

    Directory of Open Access Journals (Sweden)

    Di Chen

    2007-05-01

    Full Text Available Electrostatic micro-electro-mechanical system (MEMS is a special branch with a wide range of applications in sensing and actuating devices in MEMS. This paper provides a survey and analysis of the electrostatic force of importance in MEMS, its physical model, scaling effect, stability, nonlinearity and reliability in detail. It is necessary to understand the effects of electrostatic forces in MEMS and then many phenomena of practical importance, such as pull-in instability and the effects of effective stiffness, dielectric charging, stress gradient, temperature on the pull-in voltage, nonlinear dynamic effects and reliability due to electrostatic forces occurred in MEMS can be explained scientifically, and consequently the great potential of MEMS technology could be explored effectively and utilized optimally. A simplified parallel-plate capacitor model is proposed to investigate the resonance response, inherent nonlinearity, stiffness softened effect and coupled nonlinear effect of the typical electrostatically actuated MEMS devices. Many failure modes and mechanisms and various methods and techniques, including materials selection, reasonable design and extending the controllable travel range used to analyze and reduce the failures are discussed in the electrostatically actuated MEMS devices. Numerical simulations and discussions indicate that the effects of instability, nonlinear characteristics and reliability subjected to electrostatic forces cannot be ignored and are in need of further investigation.

  6. Nonlinear Adaptive Filter for MEMS Gyro Error Cancellation

    Data.gov (United States)

    National Aeronautics and Space Administration — Thermal biases are the dominate error in low-cost low-power small MEMS gyros. CubeSats often can't afford the power/mass to put a heater on their MEMS gyros and...

  7. RF-MEMS capacitive switches with high reliability

    Science.gov (United States)

    Goldsmith, Charles L.; Auciello, Orlando H.; Carlisle, John A.; Sampath, Suresh; Sumant, Anirudha V.; Carpick, Robert W.; Hwang, James; Mancini, Derrick C.; Gudeman, Chris

    2013-09-03

    A reliable long life RF-MEMS capacitive switch is provided with a dielectric layer comprising a "fast discharge diamond dielectric layer" and enabling rapid switch recovery, dielectric layer charging and discharging that is efficient and effective to enable RF-MEMS switch operation to greater than or equal to 100 billion cycles.

  8. Design, simulation and characterization of a MEMS inertia switch with flexible CNTs/Cu composite array layer between electrodes for prolonging contact time

    International Nuclear Information System (INIS)

    Wang, Yang; Yang, Zhuoqing; Xu, Qiu; Chen, Wenguo; Ding, Guifu; Zhao, Xiaolin

    2015-01-01

    This paper reports an inertia switch with a flexible carbon nanotubes/copper (CNTs/Cu) composite array layer between movable and fixed electrodes, which achieves a longer contact time compared to the traditional design using rigid-to-rigid impact between electrodes. The CNTs/Cu layer is fabricated using the composite electroplating method, and the whole device is completed by multi-layer metal electroplating based on the micro-electro-mechanical systems (MEMS) process. The dynamic responses of the designed inertia switch and the contact impact between a single CNT and a fixed electrode/another CNT have both been simulated by the ANSYS finite-element-method (FEM). It is shown that the contact time of the designed inertia switch is about 100 µs under the applied 80 g half-sine-shaped acceleration in the sensing direction. Finally, the fabricated MEMS inertia switch with the flexible CNTs/Cu composite array layer between electrodes has been evaluated by a dropping hammer system. The test contact time is about112 µs, which has a good agreement with the simulation and is much longer than that of the traditional design. (paper)

  9. CMOS MEMS capacitive absolute pressure sensor

    International Nuclear Information System (INIS)

    Narducci, M; Tsai, J; Yu-Chia, L; Fang, W

    2013-01-01

    This paper presents the design, fabrication and characterization of a capacitive pressure sensor using a commercial 0.18 µm CMOS (complementary metal–oxide–semiconductor) process and postprocess. The pressure sensor is capacitive and the structure is formed by an Al top electrode enclosed in a suspended SiO 2 membrane, which acts as a movable electrode against a bottom or stationary Al electrode fixed on the SiO 2 substrate. Both the movable and fixed electrodes form a variable parallel plate capacitor, whose capacitance varies with the applied pressure on the surface. In order to release the membranes the CMOS layers need to be applied postprocess and this mainly consists of four steps: (1) deposition and patterning of PECVD (plasma-enhanced chemical vapor deposition) oxide to protect CMOS pads and to open the pressure sensor top surface, (2) etching of the sacrificial layer to release the suspended membrane, (3) deposition of PECVD oxide to seal the etching holes and creating vacuum inside the gap, and finally (4) etching of the passivation oxide to open the pads and allow electrical connections. This sensor design and fabrication is suitable to obey the design rules of a CMOS foundry and since it only uses low-temperature processes, it allows monolithic integration with other types of CMOS compatible sensors and IC (integrated circuit) interface on a single chip. Experimental results showed that the pressure sensor has a highly linear sensitivity of 0.14 fF kPa −1 in the pressure range of 0–300 kPa. (paper)

  10. In Situ Identification and Stratification of Monochloramine Inhibition Effects on Nitrifying Biofilms as Determined by the Use of Microelectrodes

    Science.gov (United States)

    The nitrifying biofilm grown in an annular biofilm reactor and the microbial deactivation achieved after monochloramine treatment were investigated using microelectrodes. The nitrifying biofilm ammonium microprofile was measured and the effect of monochloramine on nitrifying bio...

  11. Advantages of PZT thick film for MEMS sensors

    DEFF Research Database (Denmark)

    Hindrichsen, Christian Carstensen; Lou-Moller, R.; Hansen, K.

    2010-01-01

    For all MEMS devices a high coupling between the mechanical and electrical domain is desired. Figures of merit describing the coupling are important for comparing different piezoelectric materials. The existing figures of merit are discussed and a new figure of merit is introduced for a fair comp....... Improved figure of merit is reached in the piezoelectric PZT thick film, TF2100CIP, by using cold isostatic pressure in the PZT preparation process. The porosity of TF2100 is decreased 38%, hence, allowing an increase of charge sensitivity for MEMS sensors of 59%....... thin film and PZT thick film. It is shown that MEMS sensors with the PZT thick film TF2100 from InSensor A/S have potential for significant higher voltage sensitivities compared to PZT thin film base MEMS sensors when the total thickness of the MEMS cantilever, beam, bridge or membrane is high...

  12. Using MEMS Capacitive Switches in Tunable RF Amplifiers

    Directory of Open Access Journals (Sweden)

    Danson John

    2006-01-01

    Full Text Available A MEMS capacitive switch suitable for use in tunable RF amplifiers is described. A MEMS switch is designed, fabricated, and characterized with physical and RF measurements for inclusion in simulations. Using the MEMS switch models, a dual-band low-noise amplifier (LNA operating at GHz and GHz, and a tunable power amplifier (PA at GHz are simulated in m CMOS. MEMS switches allow the LNA to operate with 11 dB of isolation between the two bands while maintaining dB of gain and sub- dB noise figure. MEMS switches are used to implement a variable matching network that allows the PA to realize up to 37% PAE improvement at low input powers.

  13. New dynamic silicon photonic components enabled by MEMS technology

    Science.gov (United States)

    Errando-Herranz, Carlos; Edinger, Pierre; Colangelo, Marco; Björk, Joel; Ahmed, Samy; Stemme, Göran; Niklaus, Frank; Gylfason, Kristinn B.

    2018-02-01

    Silicon photonics is the study and application of integrated optical systems which use silicon as an optical medium, usually by confining light in optical waveguides etched into the surface of silicon-on-insulator (SOI) wafers. The term microelectromechanical systems (MEMS) refers to the technology of mechanics on the microscale actuated by electrostatic actuators. Due to the low power requirements of electrostatic actuation, MEMS components are very power efficient, making them well suited for dense integration and mobile operation. MEMS components are conventionally also implemented in silicon, and MEMS sensors such as accelerometers, gyros, and microphones are now standard in every smartphone. By combining these two successful technologies, new active photonic components with extremely low power consumption can be made. We discuss our recent experimental work on tunable filters, tunable fiber-to-chip couplers, and dynamic waveguide dispersion tuning, enabled by the marriage of silicon MEMS and silicon photonics.

  14. A nuclear micro battery for Mems devices

    International Nuclear Information System (INIS)

    Blanchard, J.; Lal, A.; Henderson, D.; Bilbao Y Leon, R.; Guo, H.; Li, H.; Santanam, S.; Yao, R.

    2001-01-01

    Micro-electromechanical Systems (MEMS) have not gained wide use because they lack the on-device power required by many important applications. Several forms of energy could be considered to supply this needed power (solar, fossil fuels, etc), but nuclear sources provide an intriguing option in terms of power density and lifetime. This paper describes several approaches for establishing the viability of nuclear sources for powering realistic MEMS devices. Isotopes currently being used include low-energy beta emitters (solid and liquid) and alpha emitters (solid). Several approaches are being explored for the production of MEMS power sources. The first concept is a junction-type battery. In this case, the charged particles emitted from the decay of the radioisotopes are absorbed by a semiconductor and dissipate most of their energy as ionization of the atoms in the solid. The carriers generated in this fashion are in excess of the number permitted by thermodynamic equilibrium and, if they diffuse to the vicinity of a rectifying junction, induce a voltage across the junction. The second concept involves a more direct use of the charged particles produced by the decay: the creation of a resonator by inducing movement due to attraction or repulsion resulting from the collection of charged particles. As the charge is collected, the deflection of a cantilever beam increases until it contacts a grounded element, thus discharging the beam and causing it to return to its original position. This process will repeat as long as the source is active. One final concept relies on temperature gradients produced by the sources, along with appropriate insulation, to create power using a Peltier device. The source is isolated in order to allow it to reach sufficient temperatures, and the temperature difference between the source and the rest of the device is exploited using the Peltier effect. Performance results will be provided for each of these concepts. (author)

  15. Multiscale Simulation of Porous Ceramics Based on Movable Cellular Automaton Method

    Science.gov (United States)

    Smolin, A.; Smolin, I.; Eremina, G.; Smolina, I.

    2017-10-01

    The paper presents a model for simulating mechanical behaviour of multiscale porous ceramics based on movable cellular automaton method, which is a novel particle method in computational mechanics of solid. The initial scale of the proposed approach corresponds to the characteristic size of the smallest pores in the ceramics. At this scale, we model uniaxial compression of several representative samples with an explicit account of pores of the same size but with the random unique position in space. As a result, we get the average values of Young’s modulus and strength, as well as the parameters of the Weibull distribution of these properties at the current scale level. These data allow us to describe the material behaviour at the next scale level were only the larger pores are considered explicitly, while the influence of small pores is included via the effective properties determined at the previous scale level. If the pore size distribution function of the material has N maxima we need to perform computations for N - 1 levels in order to get the properties from the lowest scale up to the macroscale step by step. The proposed approach was applied to modelling zirconia ceramics with bimodal pore size distribution. The obtained results show correct behaviour of the model sample at the macroscale.

  16. Movable Thomson scattering system based on optical fiber (TS-probe)

    International Nuclear Information System (INIS)

    Narihara, K.; Hayashi, H.

    2009-01-01

    This paper proposes a movable compact Thomson scattering (TS) system based on optical fibers (TS-probe). A TS-probe consists of a probe head, optical fiber, a laser-diode, polychromators and lock-in amplifiers. A laser beam optics and light collection optics are mounted rigidly on a probe head with a fixed scattering position. Laser light and scattered light are transmitted by flexible optical fibers, enabling us to move the TS-prove head freely during plasma discharge. The light signal scattered from an amplitude-modulated laser is detected against the plasma light based on the principle of the lock-in amplifier. With a modulated laser power of 300W, the scattered signal from a sheet plasma of 15 mm depth and n e -10 19 m -3 will be measured with 10% accuracy by setting the integrating time to 0.1 s. The TS-probe head is like a 1/20 model of the currently operating LHD-TS. (author)

  17. The Multipoint Global Shape Optimization of Flying Configuration with Movable Leading Edges Flaps

    Directory of Open Access Journals (Sweden)

    Adriana NASTASE

    2012-12-01

    Full Text Available The aerodynamical global optimized (GO shape of flying configuration (FC, at two cruising Mach numbers, can be realized by morphing. Movable leading edge flaps are used for this purpose. The equations of the surfaces of the wing, of the fuselage and of the flaps in stretched position are approximated in form of superpositions of homogeneous polynomes in two variables with free coefficients. These coefficients together with the similarity parameters of the planform of the FC are the free parameters of the global optimization. Two enlarged variational problems with free boundaries occur. The first one consists in the determination of the GO shape of the wing-fuselageFC, with the flaps in retracted position, which must be of minimum drag, at higher cruising Mach number. The second enlarged variational problem consists in the determination of the GO shape of the flaps in stretched position in such a manner that the entire FC shall be of minimum drag at the second lower Mach number. The iterative optimum-optimorum (OO theory of the author is used for the solving of these both enlarged variational problems. The inviscid GO shape of the FC is used only in the first step of iteration and the own developed hybrid solutions for the compressible Navier-Stokes partial-differential equations (PDEs are used for the determination of the friction drag coefficient and up the second step of iteration of OO theory.

  18. Characterization of a vertically movable gate field effect transistor using a silicon-on-insulator wafer

    Science.gov (United States)

    Song, In-Hyouk; Forfang, William B. D.; Cole, Bryan; You, Byoung Hee

    2014-10-01

    The vertically movable gate field effect transistor (VMGFET) is a FET-based sensing element, whose gate moves in a vertical direction over the channel. A VMGFET gate covers the region between source and drain. A 1 μm thick air layer separates the gate and the substrate of the VMGFET. A novel fabrication process to form a VMGFET using a silicon-on-insulator (SOI) wafer provides minimal internal stress of the gate structure. The enhancement-type n-channel VMGFET is fabricated with the threshold voltage of 2.32 V in steady state. A non-inverting amplifier is designed and integrated on a printable circuit board (PCB) to characterize device sensitivity and mechanical properties. The VMGFET is mechanically coupled to a speaker membrane to apply mechanical vibration. The oscillated drain current of FET are monitored and sampled with NI LabVIEW. The frequency of the output signal correlates with that of the input stimulus. The resonance frequency of the fabricated VMGFET is measured to be 1.11 kHz. The device sensitivity linearly increases by 0.106 mV/g Hz in the range of 150 Hz and 1 kHz.

  19. Characterization of a vertically movable gate field effect transistor using a silicon-on-insulator wafer

    International Nuclear Information System (INIS)

    Song, In-Hyouk; Forfang, William B D; Cole, Bryan; Hee You, Byoung

    2014-01-01

    The vertically movable gate field effect transistor (VMGFET) is a FET-based sensing element, whose gate moves in a vertical direction over the channel. A VMGFET gate covers the region between source and drain. A 1 μm thick air layer separates the gate and the substrate of the VMGFET. A novel fabrication process to form a VMGFET using a silicon-on-insulator (SOI) wafer provides minimal internal stress of the gate structure. The enhancement-type n-channel VMGFET is fabricated with the threshold voltage of 2.32 V in steady state. A non-inverting amplifier is designed and integrated on a printable circuit board (PCB) to characterize device sensitivity and mechanical properties. The VMGFET is mechanically coupled to a speaker membrane to apply mechanical vibration. The oscillated drain current of FET are monitored and sampled with NI LabVIEW. The frequency of the output signal correlates with that of the input stimulus. The resonance frequency of the fabricated VMGFET is measured to be 1.11 kHz. The device sensitivity linearly increases by 0.106 mV/g Hz in the range of 150 Hz and 1 kHz. (paper)

  20. Active and passive kink mode studies in a tokamak with a movable ferromagnetic wall

    Energy Technology Data Exchange (ETDEWEB)

    Levesque, J. P.; Hughes, P. E.; Bialek, J.; Byrne, P. J.; Mauel, M. E.; Navratil, G. A.; Peng, Q.; Rhodes, D. J.; Stoafer, C. C. [Department of Applied Physics and Applied Mathematics, Columbia University, 500 W. 120th Street, New York, New York 10027 (United States)

    2015-05-15

    High-resolution active and passive kink mode studies are conducted in a tokamak with an adjustable ferromagnetic wall near the plasma surface. Ferritic tiles made from 5.6 mm thick Hiperco{sup ®} 50 alloy have been mounted on the plasma-facing side of half of the in-vessel movable wall segments in the High Beta Tokamak-Extended Pulse device [D. A. Maurer et al., Plasma Phys. Controlled Fusion 53, 074016 (2011)] in order to explore ferritic resistive wall mode stability. Low-activation ferritic steels are a candidate for structural components of a fusion reactor, and these experiments examine MHD stability of plasmas with nearby ferromagnetic material. Plasma-wall separation for alternating ferritic and non-ferritic wall segments is adjusted between discharges without opening the vacuum vessel. Amplification of applied resonant magnetic perturbations and plasma disruptivity are observed to increase when the ferromagnetic wall is close to plasma surface instead of the standard stainless steel wall. Rapidly rotating m/n=3/1 external kink modes have higher growth rates with the nearby ferritic wall. Feedback suppression of kinks is still as effective as before the installation of ferritic material in vessel, in spite of increased mode growth rates.

  1. Commissioning of the SPARC Movable Emittance Meter and Its First Operation at PITZ

    CERN Document Server

    Catani, L; Cianchi, A

    2005-01-01

    For the SPARC Project a novel diagnostic device, called "Emittance-meter", has been conceived and constructed to perform a detailed study of the emittance compensation process in the SPARC photo-injector and to optimize the RF-gun and the accelerator working point. It consists of a movable emittance measurement system, based on the 1D pepper-pot method, installed between two long bellows with the possibility to scan a region 1.5 m long downstream the RF-gun. The construction of the device was completed in the first part of this year and a series of laboratory tests, to evaluate its performances, were carried out in Spring 2005. At the beginning of the summer the complete system was moved to DESY at Zeuthen to be installed on the Photo Injector Test Facility PITZ. After the commissioning it will used for measurements of the PITZ electron beam in the framework of a collaboration between the SPARC and PITZ Projects aiming on studies and operations with photo injectors.

  2. Research on the electromagnetic structure of movable coil electromagnet drive mechanism for reactor control rod

    International Nuclear Information System (INIS)

    Zhang Jige; Yian Huijie; Wu Yuanqiang; Wu Xinxin; Yu Suyuan; He Shuyan

    2007-01-01

    The movable coil electromagnet drive mechanism (MCEDM) is a new drive scheme for the reactor control rod, and it has a simple structure, good security and reliability property, etc. MCEDM with an air cooled structure has been used in the land research reactor. In order to apply MCEDM to the mobile reactor, experimental and theoretical study on the electromagnet with an oil-water cooled structure and a single magnetic flux circuit (called the type A electro-magnet) has been completed. It is proven by the experiment and theory that the oil-water cooled structure is an excellent measure to increase the coil current of MCEDM. Moreover, a type B electromagnet with an oil-water cooled structure and double magnetic flux circuits is designed to further increase the magnetic force of MCEDM. The analysis of finite element method shows that the type B electromagnet could double the saturation current of type A electro-magnet and the magnetic force of type B electromagnet is greater than that of the type A electromagnet. Moreover, it is proven that the dynamic property of type B electromagnet is better than type A electromagnet. (author)

  3. Electromechanical model to predict the movability of liquids in an electrowetting-on-dielectric microfluidic device

    Science.gov (United States)

    Torabinia, Matin; Farzbod, Ali; Moon, Hyejin

    2018-04-01

    In electrowetting-on-dielectric (EWOD) microfluidics, a motion of a fluid is created by a voltage applied to the fluid/surface interface. Water and aqueous solutions are the most frequently used fluids in EWOD devices. In order for EWOD microfluidics to be a versatile platform for various applications, however, movability of different types of fluids other than aqueous solutions should be understood. An electromechanical model using a simple RC circuit has been used to predict the mechanical force exerted on a liquid droplet upon voltage application. In this present study, two important features missed in previous works are addressed. Energy dissipation by contact line friction is considered in the new model as the form of resistor. The phase angle is taken into account in the analysis of the AC circuit. The new electromechanical model and computation results are validated with experimental measurements of forces on two different liquids. The model is then used to explain influences of contact angle hysteresis, surface tension, conductivity, and dielectric constant of fluids to the mechanical force on a liquid droplet.

  4. A Labeling Model Based on the Region of Movability for Point-Feature Label Placement

    Directory of Open Access Journals (Sweden)

    Lin Li

    2016-09-01

    Full Text Available Automatic point-feature label placement (PFLP is a fundamental task for map visualization. As the dominant solutions to the PFLP problem, fixed-position and slider models have been widely studied in previous research. However, the candidate labels generated with these models are set to certain fixed positions or a specified track line for sliding. Thus, the whole surrounding space of a point feature is not sufficiently used for labeling. Hence, this paper proposes a novel label model based on the region of movability, which comes from plane collision detection theory. The model defines a complete conflict-free search space for label placement. On the premise of no conflict with the point, line, and area features, the proposed model utilizes the surrounding zone of the point feature to generate candidate label positions. By combining with heuristic search method, the model achieves high-quality label placement. In addition, the flexibility of the proposed model enables placing arbitrarily shaped labels.

  5. Large-region acoustic source mapping using a movable array and sparse covariance fitting.

    Science.gov (United States)

    Zhao, Shengkui; Tuna, Cagdas; Nguyen, Thi Ngoc Tho; Jones, Douglas L

    2017-01-01

    Large-region acoustic source mapping is important for city-scale noise monitoring. Approaches using a single-position measurement scheme to scan large regions using small arrays cannot provide clean acoustic source maps, while deploying large arrays spanning the entire region of interest is prohibitively expensive. A multiple-position measurement scheme is applied to scan large regions at multiple spatial positions using a movable array of small size. Based on the multiple-position measurement scheme, a sparse-constrained multiple-position vectorized covariance matrix fitting approach is presented. In the proposed approach, the overall sample covariance matrix of the incoherent virtual array is first estimated using the multiple-position array data and then vectorized using the Khatri-Rao (KR) product. A linear model is then constructed for fitting the vectorized covariance matrix and a sparse-constrained reconstruction algorithm is proposed for recovering source powers from the model. The user parameter settings are discussed. The proposed approach is tested on a 30 m × 40 m region and a 60 m × 40 m region using simulated and measured data. Much cleaner acoustic source maps and lower sound pressure level errors are obtained compared to the beamforming approaches and the previous sparse approach [Zhao, Tuna, Nguyen, and Jones, Proc. IEEE Intl. Conf. on Acoustics, Speech and Signal Processing (ICASSP) (2016)].

  6. Controller Design and Experiment for Tracking Mount of Movable SLR, ARGO-M

    Directory of Open Access Journals (Sweden)

    Cheol Hoon Park

    2012-04-01

    Full Text Available Controller design procedure for prototype tracking mount of Movable SLR (Satellite Laser Ranging, ARGO-M is presented. Tracking mount of ARGO-M is altitude-azimuth type and it has two axes of elevation and azimuth to control its position. Controller consists of velocity and acceleration feed-forward controller, position controller at outer loop, velocity controller at inner loop. There are two kinds of position control modes. One is the pointing mode to move from one position to the other position as fast as possible and the other one is tracking mode to follow SLR trajectory as precise as possible. Because the requirement of tracking accuracy is less than 5 arcsec and it is very tight error budget, a sophisticated controller needs to be prepared to meet the accuracy. Especially, ARGO-M is using the cross-roller bearing at each axis to increase the mechanical accuracy, which requires add-on controller DOB (Disturbance observer to suppress friction load and low frequency disturbances. The pointing and tracking performance of the designed controller is simulated and visualized using MATLAB/ Simulink and SimMechanics and the experimental results using test are presented as well.

  7. Simulation of beta radiator handling procedures in nuclear medicine by means of a movable hand phantom.

    Science.gov (United States)

    Blunck, Ch; Becker, F; Urban, M

    2011-03-01

    In nuclear medicine therapies, people working with beta radiators such as (90)Y may be exposed to non-negligible partial body doses. For radiation protection, it is important to know the characteristics of the radiation field and possible dose exposures at relevant positions in the working area. Besides extensive measurements, simulations can provide these data. For this purpose, a movable hand phantom for Monte Carlo simulations was developed. Specific beta radiator handling scenarios can be modelled interactively with forward kinematics or automatically with an inverse kinematics procedure. As a first investigation, the dose distribution on a medical doctor's hand injecting a (90)Y solution was measured and simulated with the phantom. Modelling was done with the interactive method based on five consecutive frames from a video recorded during the injection. Owing to the use of only one camera, not each detail of the radiation scenario is visible in the video. In spite of systematic uncertainties, the measured and simulated dose values are in good agreement.

  8. Design of TFTR movable limiter blades for ohmic and neutral-beam-heated plasmas

    International Nuclear Information System (INIS)

    Doll, D.W.; Ulrickson, M.A.; Cecchi, J.L.; Citrolo, J.C.; Weissenburger, D.; Bialek, J.

    1981-10-01

    A new set of movable limiter blades has been designed for TFTR that will meet both the requirements of the 4 MW ohmic heated and the 33 MW neutral beam heated plasmas. This is accomplished with three limiter blades each having and elliptical shape along the toroidal direction. Heat flux levels are acceptable for both ohmic heated and pre-strong compression plasmas. The construction consists of graphite tiles attached to cooled backing plates. The tiles have an average thickness of approx. 4.7 cm and are drawn against the backing plate with spring loaded fasteners that are keyed into the graphite. The cooled backing plate provides the structure for resisting disruption and fault induced loads. A set of rollers attached to the top and bottom blades allow them to be expanded and closed in order to vary the plasma surface for scaling experiments. Water cooling lines penetrate only the mid-plane port cover/support plate in such a way as to avoid bolted water connections inside the vacuum boundary and at the same time allow blade movement. Both the upper and lower blades are attached to the mid-plane limiter blade through pivots. Pivot connections are protected against arcing with an alumina coating and a shunt bar strap. Remote handling is considered throughout the design

  9. Prospects for MEMS in the Automotive Industry

    Directory of Open Access Journals (Sweden)

    Richard DIXON

    2007-12-01

    Full Text Available An automotive sector as a growth market for MEMS sensors is analyzed in the article. The automotive sector accounted for $1.6 billion, making this the second biggest opportunity after IT peripherals and inkjet print heads. By 2011 the market will top $2.2 billion, a CAGR of around 7%. The main applications in revenues terms are, in order, pressure sensors, gyroscopes, accelerometers and flow sensors and this will remain so for the foreseeable future. Automotive companies are forced to innovate as a result of competition and price pressures.

  10. MEMS-Reconfigurable Metamaterials and Antenna Applications

    Directory of Open Access Journals (Sweden)

    Tomislav Debogovic

    2014-01-01

    Full Text Available This paper reviews some of our contributions to reconfigurable metamaterials, where dynamic control is enabled by microelectromechanical systems (MEMS technology. First, we show reconfigurable composite right-/left-handed transmission lines (CRLH-TLs having state of the art phase velocity variation and loss, thereby enabling efficient reconfigurable phase shifters and leaky-wave antennas (LWA. Second, we present very low loss metasurface designs with reconfigurable reflection properties, applicable in reflectarrays and partially reflective surface (PRS antennas. All the presented devices have been fabricated and experimentally validated. They operate in X- and Ku-bands.

  11. A Label-Free Microelectrode Array Based on One-Step Synthesis of Chitosan–Multi-Walled Carbon Nanotube–Thionine for Ultrasensitive Detection of Carcinoembryonic Antigen

    Directory of Open Access Journals (Sweden)

    Huiren Xu

    2016-07-01

    Full Text Available Carcinoembryonic antigen (CEA has been an extensively used tumor marker responsible for clinical early diagnosis of cervical carcinomas, and pancreatic, colorectal, gastric and lung cancer. Combined with micro-electro mechanical system (MEMS technology, it is important to develop a novel immune microelectrode array (MEA not only for rapid analysis of serum samples, but also for cell detection in vitro and in vivo. In this work, we depict a simple approach to modify chitosan–multi-walled carbon nanotubes–thionine (CS–MWCNTs–THI hybrid film through one-step electrochemical deposition and the CS-MWCNTs-THI hybrid films are successfully employed to immobilize anti-CEA for fabricating simple, label-free, and highly sensitive electro-chemical immune MEAs. The detection principle of immune MEA was based on the fact that the increasing formation of the antigen-antibody immunocomplex resulted in the decreased response currents and the relationship between the current reductions with the corresponding CEA concentrations was directly proportional. Experimental results indicated that the label-free MEA had good selectivity and the limit of detection for CEA is 0.5 pg/mL signal to noise ratio (SNR = 3. A linear calibration plot for the detection of CEA was obtained in a wide concentration range from 1 pg/mL to 100 ng/mL (r = 0.996. This novel MEA has potential applications for detecting CEA for the research on cancer cells and cancer tissue slices as well as for effective early diagnosis.

  12. [FEATURES OF THE CONTENT OF MOVABLE FORMS OF HEAVY METALS AND SELENIUM IN SOILS OF THE YAROSLAVL REGION].

    Science.gov (United States)

    Bakaeva, E A; Eremeyshvili, A V

    2016-01-01

    With the use of the method of inversion voltammetry there was analyzed the content of movableforms of trace elements: (selenium, zinc, copper lead, cadmium) in soils in the Yaroslavl district of the Yaroslavl region, and also content of zinc, copper lead, cadmium in soils and snow cover in the city of Yaroslavl. According to values of concentrations of movable compounds in soils determined trace elements can be ranked into the following row: zinc > lead > copper > selenium > cadmium. There was revealed insufficient if compared with literature data concentrations, content of movable compounds of selenium, copper and zinc in examined explored soils. The maximal concentrations of lead are revealed in the close proximity to both the city of Yaroslavl and large highways of the city. It indicates to the anthropogenic pollution of soils by this element.

  13. Vertically aligned carbon nanotube-sheathed carbon fibers as pristine microelectrodes for selective monitoring of ascorbate in vivo.

    Science.gov (United States)

    Xiang, Ling; Yu, Ping; Hao, Jie; Zhang, Meining; Zhu, Lin; Dai, Liming; Mao, Lanqun

    2014-04-15

    Using as-synthesized vertically aligned carbon nanotube-sheathed carbon fibers (VACNT-CFs) as microelectrodes without any postsynthesis functionalization, we have developed in this study a new method for in vivo monitoring of ascorbate with high selectivity and reproducibility. The VACNT-CFs are formed via pyrolysis of iron phthalocyanine (FePc) on the carbon fiber support. After electrochemical pretreatment in 1.0 M NaOH solution, the pristine VACNT-CF microelectrodes exhibit typical microelectrode behavior with fast electron transfer kinetics for electrochemical oxidation of ascorbate and are useful for selective ascorbate monitoring even with other electroactive species (e.g., dopamine, uric acid, and 5-hydroxytryptamine) coexisting in rat brain. Pristine VACNT-CFs are further demonstrated to be a reliable and stable microelectrode for in vivo recording of the dynamic increase of ascorbate evoked by intracerebral infusion of glutamate. Use of a pristine VACNT-CF microelectrode can effectively avoid any manual electrode modification and is free from person-to-person and/or electrode-to-electrode deviations intrinsically associated with conventional CF electrode fabrication, which often involves electrode surface modification with randomly distributed CNTs or other pretreatments, and hence allows easy fabrication of highly selective, reproducible, and stable microelectrodes even by nonelectrochemists. Thus, this study offers a new and reliable platform for in vivo monitoring of neurochemicals (e.g., ascorbate) to largely facilitate future studies on the neurochemical processes involved in various physiological events.

  14. Gold ultra-microelectrode arrays: application to the steady-state voltammetry of hydroxide ion in aqueous solution.

    Science.gov (United States)

    Ordeig, Olga; Banks, Craig E; Davies, Trevor J; del Campo, F Javier; Muñoz, Francesc Xavier; Compton, Richard G

    2006-05-01

    Gold ultra-microelectrode arrays are used to explore the electrochemical oxidation of hydroxide ions and are shown to be analytical useful. Two types of ultra-microelectrode arrays are used; the first consist of 256 individual electrodes of 5 microm in radius, 170 of which are electrochemically active in a cubic arrangement which are separated from their nearest neighbour by a distance of 100 microm. The second array compromises 2597 electrodes of 2.5 microm in radius and of which 1550 of which are electrochemically active in a hexagonal arrangement separated by the nearest neighbour by 55 microm. Well defined voltammetric waves are found with peak currents proportional to the concentration of hydroxide ions in the range 50 microM to 1 mM. Detection limits of 20 microM using the 170 ultra-microelectrode and 10 microM with the 1550 ultra-microelectrode array are shown to be possible but with a higher sensitivity of 4 mA M(-1) observed using the 1550 ultra-microelectrode array compared to 1.2 mA M(-1) with the 170 ultra-microelectrode array.

  15. Monitoring Ion Activities In and Around Cells Using Ion-Selective Liquid-Membrane Microelectrodes

    Directory of Open Access Journals (Sweden)

    Mark D. Parker

    2013-01-01

    Full Text Available Determining the effective concentration (i.e., activity of ions in and around living cells is important to our understanding of the contribution of those ions to cellular function. Moreover, monitoring changes in ion activities in and around cells is informative about the actions of the transporters and/or channels operating in the cell membrane. The activity of an ion can be measured using a glass microelectrode that includes in its tip a liquid-membrane doped with an ion-selective ionophore. Because these electrodes can be fabricated with tip diameters that are less than 1 μm, they can be used to impale single cells in order to monitor the activities of intracellular ions. This review summarizes the history, theory, and practice of ion-selective microelectrode use and brings together a number of classic and recent examples of their usefulness in the realm of physiological study.

  16. Fabrication of gas sensor based on field ionization from SWCNTs with tripolar microelectrode

    Science.gov (United States)

    Cai, Shengbing; Zhang, Yong; Duan, Zhemin

    2012-12-01

    We report the nanofabrication of a sulfur dioxide (SO2) sensor with a tripolar on-chip microelectrode utilizing a film of single-walled carbon nanotubes (SWCNTs) as the field ionization cathode, where the ion flow current and the partial discharge current generated by the field ionization process of gaseous molecules can be gauged to gas species and concentration. The variation of the sensitivity is less than 4% for all of the tested devices, and the sensor has selectivity against gases such as He, NO2, CO, H2, SO2 and O2. Further, the sensor response presents well-defined and reproducible linear behavior with regard to concentration in the range investigated and a detection limitation of tripolar on-chip microelectrode with SWCNTs as a cathode exhibits an impressive performance with respect to stability and anti-oxidation behavior, which are significantly better than had been possible before in the traditional bipolar sensor under explicit circumstances at room temperature.

  17. Theoretical and experimental comparison of microelectrode sensing configurations for impedimetric cell monitoring

    DEFF Research Database (Denmark)

    Carminati, M.; Caviglia, Claudia; Heiskanen, Arto

    2013-01-01

    microelectrodes using a versatile custom-made monitoring platform including a 24-channel miniaturized potentiostat. The characterization of bare microelectrodes in buffer and tracking experiments with HeLa cells over 16 hours demonstrate that the coplanar configuration provides a higher sensitivity to cell......A theoretical and experimental comparison between vertical and coplanar interdigitated sensing configurations for impedimetric cell growth tracking is presented. These widely-adopted approaches are quantitatively compared on the same cell populations and on the same 10 μm interdigitated...... adhesion and spreading (Cell Index = 1.6 vs. 0.4) albeit at a higher frequency of maximum sensitivity (100 kHz vs. 24 kHz) shifting over time. © 2014 Taylor & Francis Group....

  18. Properties of bio-oil generated by a pyrolysis of forest cedar residuals with the movable Auger-type reactor

    Energy Technology Data Exchange (ETDEWEB)

    Nishimura, Shun; Ebitani, Kohki, E-mail: ebitani@jaist.ac.jp [School of Materials Science, Japan Advanced Institute of Science and Technology, 1-1 Asahidai, Nomi, Ishikawa 923-1292 (Japan); Miyazato, Akio [Nanotechnology Center, Japan Advanced Institute of Science and Technology, 1-1 Asahidai, Nomi, Ishikawa 923-1292 (Japan)

    2016-02-01

    Our research project has developed the new movable reactor for bio-oil production in 2013 on the basis of Auger-type system. This package would be a great impact due to the concept of local production for local consumption in the hilly and mountainous area in not only Japan but also in the world. Herein, we would like to report the properties of the bio-oil generated by the developing Auger-type movable reactor. The synthesized bio-oil possessed C: 46.2 wt%, H: 6.5 wt%, N: wt%, S: <0.1 wt%, O: 46.8 wt% and H{sub 2}O: 18.4 wt%, and served a good calorific value of 18.1 MJ/kg. The spectroscopic and mass analyses such as FT-IR, GC-MS, {sup 13}C-NMR and FT-ICR MS supported that the bio-oil was composed by the fine mixtures of methoxy phenols and variety of alcohol or carboxylic acid functional groups. Thus, it is suggested that the bio-oil generated by the new movable Auger-type reactor has a significant potential as well as the existing bio-oil reported previously.

  19. Properties of bio-oil generated by a pyrolysis of forest cedar residuals with the movable Auger-type reactor

    International Nuclear Information System (INIS)

    Nishimura, Shun; Ebitani, Kohki; Miyazato, Akio

    2016-01-01

    Our research project has developed the new movable reactor for bio-oil production in 2013 on the basis of Auger-type system. This package would be a great impact due to the concept of local production for local consumption in the hilly and mountainous area in not only Japan but also in the world. Herein, we would like to report the properties of the bio-oil generated by the developing Auger-type movable reactor. The synthesized bio-oil possessed C: 46.2 wt%, H: 6.5 wt%, N: wt%, S: <0.1 wt%, O: 46.8 wt% and H 2 O: 18.4 wt%, and served a good calorific value of 18.1 MJ/kg. The spectroscopic and mass analyses such as FT-IR, GC-MS, 13 C-NMR and FT-ICR MS supported that the bio-oil was composed by the fine mixtures of methoxy phenols and variety of alcohol or carboxylic acid functional groups. Thus, it is suggested that the bio-oil generated by the new movable Auger-type reactor has a significant potential as well as the existing bio-oil reported previously

  20. Nanowire-templated microelectrodes for high-sensitivity pH detection

    DEFF Research Database (Denmark)

    Antohe, V.A.; Radu, Adrian; Mátéfi-Tempfli, Mária

    2009-01-01

    A highly sensitive pH capacitive sensor has been designed by confined growth of vertically aligned nanowire arrays on interdigited microelectrodes. The active surface of the device has been functionalized with an electrochemical pH transducer (polyaniline). We easily tune the device features...... by combining lithographic techniques with electrochemical synthesis. The reported electrical LC resonance measurements show considerable sensitivity enhancement compared to conventional capacitive pH sensors realized with microfabricated interdigited electrodes. The sensitivity can be easily improved...

  1. A rota como memória

    Directory of Open Access Journals (Sweden)

    Patrick Fraysse

    Full Text Available No contexto de estudo do patrimônio por um ponto de vista comunicacional, este artigo permitiu-nos visualisar um objeto de comunicação por excelência « a estrada » como portador de informação a decifrar e a interpretar um documento, mas também como um repositário da memória coletiva, quer dizer um monumento. Paralelamente, a patrimonialização dos monumentos, dos conjuntos arquiteturais e sobretudo dos itinerários que os religam, dito de outra maneira, da estrada, assim como a sua documentarização (relatos de viagens, guias, bancos de dados participam de uma nova institucionalização da memória integrante também das estradas míticas como o caminho de São Tiago na França ou a famosa estrada 66 nos Estados-Unidos.

  2. MEMS Integrated Submount Alignment for Optoelectronics

    Science.gov (United States)

    Shakespeare, W. Jeffrey; Pearson, Raymond A.; Grenestedt, Joachim L.; Hutapea, Parsaoran; Gupta, Vikas

    2005-02-01

    One of the most expensive and time-consuming production processes for single-mode fiber-optic components is the alignment of the photonic chip or waveguide to the fiber. The alignment equipment is capital intensive and usually requires trained technicians to achieve desired results. Current technology requires active alignment since tolerances are only ~0.2 μ m or less for a typical laser diode. This is accomplished using piezoelectric actuated stages and active optical feedback. Joining technologies such as soldering, epoxy bonding, or laser welding may contribute significant postbond shift, and final coupling efficiencies are often less than 80%. This paper presents a method of adaptive optical alignment to freeze in place directly on an optical submount using a microelectromechanical system (MEMS) shape memory alloy (SMA) actuation technology. Postbond shift is eliminated since the phase change is the alignment actuation. This technology is not limited to optical alignment but can be applied to a variety of MEMS actuations, including nano-actuation and nano-alignment for biomedical applications. Experimental proof-of-concept results are discussed, and a simple analytical model is proposed to predict the stress strain behavior of the optical submount. Optical coupling efficiencies and alignment times are compared with traditional processes. The feasibility of this technique in high-volume production is discussed.

  3. Frequency adjustable MEMS vibration energy harvester

    Science.gov (United States)

    Podder, P.; Constantinou, P.; Amann, A.; Roy, S.

    2016-10-01

    Ambient mechanical vibrations offer an attractive solution for powering the wireless sensor nodes of the emerging “Internet-of-Things”. However, the wide-ranging variability of the ambient vibration frequencies pose a significant challenge to the efficient transduction of vibration into usable electrical energy. This work reports the development of a MEMS electromagnetic vibration energy harvester where the resonance frequency of the oscillator can be adjusted or tuned to adapt to the ambient vibrational frequency. Micro-fabricated silicon spring and double layer planar micro-coils along with sintered NdFeB micro-magnets are used to construct the electromagnetic transduction mechanism. Furthermore, another NdFeB magnet is adjustably assembled to induce variable magnetic interaction with the transducing magnet, leading to significant change in the spring stiffness and resonance frequency. Finite element analysis and numerical simulations exhibit substantial frequency tuning range (25% of natural resonance frequency) by appropriate adjustment of the repulsive magnetic interaction between the tuning and transducing magnet pair. This demonstrated method of frequency adjustment or tuning have potential applications in other MEMS vibration energy harvesters and micromechanical oscillators.

  4. Piezoelectric Zinc Oxide Based MEMS Acoustic Sensor

    Directory of Open Access Journals (Sweden)

    Aarti Arora

    2008-04-01

    Full Text Available An acoustic sensors exhibiting good sensitivity was fabricated using MEMS technology having piezoelectric zinc oxide as a dielectric between two plates of capacitor. Thin film zinc oxide has structural, piezoelectric and optical properties for surface acoustic wave (SAW and bulk acoustic wave (BAW devices. Oxygen effficient films are transparent and insulating having wide applications for sensors and transducers. A rf sputtered piezoelectric ZnO layer transforms the mechanical deflection of a thin etched silicon diaphragm into a piezoelectric charge. For 25-micron thin diaphragm Si was etched in tetramethylammonium hydroxide solution using bulk micromachining. This was followed by deposition of sandwiched structure composed of bottom aluminum electrode, sputtered 3 micron ZnO film and top aluminum electrode. A glass having 1 mm diameter hole was bonded on backside of device to compensate sound pressure in side the cavity. The measured value of central capacitance and dissipation factor of the fabricated MEMS acoustic sensor was found to be 82.4pF and 0.115 respectively, where as the value of ~176 pF was obtained for the rim capacitance with a dissipation factor of 0.138. The response of the acoustic sensors was reproducible for the devices prepared under similar processing conditions under different batches. The acoustic sensor was found to be working from 30Hz to 8KHz with a sensitivity of 139µV/Pa under varying acoustic pressure.

  5. Characterisation and Modelling of MEMS Ultrasonic Transducers

    International Nuclear Information System (INIS)

    Teng, M F; Hariz, A J

    2006-01-01

    Silicon ultrasonic transducer micro arrays based on micro-electro-mechanicalsystem (MEMS) technologies are gaining popularity for applications in sonar sensing and excitation. A current challenge for many researchers is modelling the dynamic performance of these and other micro-mechanical devices to ascertain their performance and explain experimental observations reported. In this work, the performance simulation of a MEMS ultrasonic transducer array made from silicon nitride has been successfully carried out using CoventorWare package. The dynamic response of the entire transducer array was characterised, and the results were compared with theoretical predictions. Individual elements were found to vibrate with Bessel-like displacement patterns, and they were resonant at approximately 3 MHz, depending on thickness and lateral dimensions. The frequency shows a linear dependence around the common thickness of 2 μm. Peak displacement levels were examined as a function of frequency, DC bias voltage, and AC drive voltage. Accounting for fabrication variations, and uniformity variations across the wafer, the full array showed minimal variations in peak out-of-plane displacement levels across the device, and isolated elements that were over-responsive and under-responsive. Presently, the effect of observed variations across the array on the performance of the transducers and their radiated fields are being examined

  6. Frequency adjustable MEMS vibration energy harvester

    International Nuclear Information System (INIS)

    Podder, P; Constantinou, P; Roy, S; Amann, A

    2016-01-01

    Ambient mechanical vibrations offer an attractive solution for powering the wireless sensor nodes of the emerging “Internet-of-Things”. However, the wide-ranging variability of the ambient vibration frequencies pose a significant challenge to the efficient transduction of vibration into usable electrical energy. This work reports the development of a MEMS electromagnetic vibration energy harvester where the resonance frequency of the oscillator can be adjusted or tuned to adapt to the ambient vibrational frequency. Micro-fabricated silicon spring and double layer planar micro-coils along with sintered NdFeB micro-magnets are used to construct the electromagnetic transduction mechanism. Furthermore, another NdFeB magnet is adjustably assembled to induce variable magnetic interaction with the transducing magnet, leading to significant change in the spring stiffness and resonance frequency. Finite element analysis and numerical simulations exhibit substantial frequency tuning range (25% of natural resonance frequency) by appropriate adjustment of the repulsive magnetic interaction between the tuning and transducing magnet pair. This demonstrated method of frequency adjustment or tuning have potential applications in other MEMS vibration energy harvesters and micromechanical oscillators. (paper)

  7. Chronic, percutaneous connector for electrical recording and stimulation with microelectrode arrays.

    Science.gov (United States)

    Shah, Kedar G; Lee, Kye Young; Tolosa, Vanessa; Tooker, Angela; Felix, Sarah; Benett, William; Pannu, Satinderpall

    2014-01-01

    The translation of advances in neural stimulation and recording research into clinical practice hinges on the ability to perform chronic experiments in awake and behaving animal models. Advances in microelectrode array technology, most notably flexible polymer arrays, have significantly improved reliability of the neural interface. However, electrical connector technology has lagged and is prone to failure from non-biocompatibility, large size, contamination, corrosion, and difficulty of use. We present a novel chronic, percutaneous electrical connector system that is suitable for neural stimulation and recording. This system features biocompatible materials, low connect and disconnect forces, passive alignment, and a protective cap during non-use. We have successfully designed, assembled, and tested in vitro both a 16-channel system and a high density 64-channel system. Custom, polyimide, 16-channel, microelectrode arrays were electrically assembled with the connector system and tested using cyclic voltammetry and electrochemical impedance spectroscopy. This connector system is versatile and can be used with a variety of microelectrode array technologies for chronic studies.

  8. Microfabrication, characterization and in vivo MRI compatibility of diamond microelectrodes array for neural interfacing

    Energy Technology Data Exchange (ETDEWEB)

    Hébert, Clément, E-mail: clement.hebert@cea.fr [Institut Néel, CNRS et Université Joseph Fourier, BP 166, F-38042 Grenoble Cedex 9 (France); Warnking, Jan; Depaulis, Antoine [INSERM, U836, Grenoble Institut des Neurosciences, Grenoble (France); Garçon, Laurie Amandine [Institut Néel, CNRS et Université Joseph Fourier, BP 166, F-38042 Grenoble Cedex 9 (France); CEA/INAC/SPrAM/CREAB, 17 rue des Martyrs, 38054 Grenoble Cedex 9 (France); Mermoux, Michel [Université Grenoble Alpes, LEPMI, F-38000 Grenoble (France); CNRS, LEPMI, F-38000 Grenoble (France); Eon, David [Institut Néel, CNRS et Université Joseph Fourier, BP 166, F-38042 Grenoble Cedex 9 (France); Mailley, Pascal [CEA-LETI-DTBS Minatec, 17 rue des Martyres, 38054 Grenoble (France); Omnès, Franck [Institut Néel, CNRS et Université Joseph Fourier, BP 166, F-38042 Grenoble Cedex 9 (France)

    2015-01-01

    Neural interfacing still requires highly stable and biocompatible materials, in particular for in vivo applications. Indeed, most of the currently used materials are degraded and/or encapsulated by the proximal tissue leading to a loss of efficiency. Here, we considered boron doped diamond microelectrodes to address this issue and we evaluated the performances of a diamond microelectrode array. We described the microfabrication process of the device and discuss its functionalities. We characterized its electrochemical performances by cyclic voltammetry and impedance spectroscopy in saline buffer and observed the typical diamond electrode electrochemical properties, wide potential window and low background current, allowing efficient electrochemical detection. The charge storage capacitance and the modulus of the electrochemical impedance were found to remain in the same range as platinum electrodes used for standard commercial devices. Finally we observed a reduced Magnetic Resonance Imaging artifact when the device was implanted on a rat cortex, suggesting that boron doped-diamond is a very promising electrode material allowing functional imaging. - Highlights: • Microfabrication of all-diamond microelectrode array • Evaluation of as-grown nanocrystalline boron-doped diamond for electrical neural interfacing • MRI compatibility of nanocrystalline boron-doped diamond.

  9. Static and Dynamic Measurement of Dopamine Adsorption in Carbon Fiber Microelectrodes Using Electrochemical Impedance Spectroscopy.

    Science.gov (United States)

    Rivera-Serrano, Nilka; Pagan, Miraida; Colón-Rodríguez, Joanisse; Fuster, Christian; Vélez, Román; Almodovar-Faria, Jose; Jiménez-Rivera, Carlos; Cunci, Lisandro

    2018-02-06

    In this study, electrochemical impedance spectroscopy was used for the first time to study the adsorption of dopamine in carbon fiber microelectrodes. In order to show a proof-of-concept, static and dynamic measurements were taken at potentials ranging from -0.4 to 0.8 V versus Ag|AgCl to demonstrate the versatility of this technique to study dopamine without the need of its oxidation. We used electrochemical impedance spectroscopy and single frequency electrochemical impedance to measure different concentrations of dopamine as low as 1 nM. Moreover, the capacitance of the microelectrodes surface was found to decrease due to dopamine adsorption, which is dependent on its concentration. The effect of dissolved oxygen and electrochemical oxidation of the surface in the detection of dopamine was also studied. Nonoxidized and oxidized carbon fiber microelectrodes were prepared and characterized by optical microscopy, scanning electron microscopy, cyclic voltammetry, and electrochemical impedance spectroscopy. Optimum working parameters of the electrodes, such as frequency and voltage, were obtained for better measurement. Electrochemical impedance of dopamine was determined at different concentration, voltages, and frequencies. Finally, dynamic experiments were conducted using a flow cell and single frequency impedance in order to study continuous and real-time measurements of dopamine.

  10. Field-programmable lab-on-a-chip based on microelectrode dot array architecture.

    Science.gov (United States)

    Wang, Gary; Teng, Daniel; Lai, Yi-Tse; Lu, Yi-Wen; Ho, Yingchieh; Lee, Chen-Yi

    2014-09-01

    The fundamentals of electrowetting-on-dielectric (EWOD) digital microfluidics are very strong: advantageous capability in the manipulation of fluids, small test volumes, precise dynamic control and detection, and microscale systems. These advantages are very important for future biochip developments, but the development of EWOD microfluidics has been hindered by the absence of: integrated detector technology, standard commercial components, on-chip sample preparation, standard manufacturing technology and end-to-end system integration. A field-programmable lab-on-a-chip (FPLOC) system based on microelectrode dot array (MEDA) architecture is presented in this research. The MEDA architecture proposes a standard EWOD microfluidic component called 'microelectrode cell', which can be dynamically configured into microfluidic components to perform microfluidic operations of the biochip. A proof-of-concept prototype FPLOC, containing a 30 × 30 MEDA, was developed by using generic integrated circuits computer aided design tools, and it was manufactured with standard low-voltage complementary metal-oxide-semiconductor technology, which allows smooth on-chip integration of microfluidics and microelectronics. By integrating 900 droplet detection circuits into microelectrode cells, the FPLOC has achieved large-scale integration of microfluidics and microelectronics. Compared to the full-custom and bottom-up design methods, the FPLOC provides hierarchical top-down design approach, field-programmability and dynamic manipulations of droplets for advanced microfluidic operations.

  11. Novel microelectrode-based online system for monitoring N2O gas emissions during wastewater treatment.

    Science.gov (United States)

    Marques, Ricardo; Oehmen, Adrian; Pijuan, Maite

    2014-11-04

    Clark-type nitrous oxide (N2O) microelectrodes are commonly used for measuring dissolved N2O levels, but have not previously been tested for gas-phase applications, where the N2O emitted from wastewater systems can be directly quantified. In this study, N2O microelectrodes were tested and validated for online gas measurements, and assessed with respect to their temperature, gas flow, composition dependence, gas pressure, and humidity. An exponential correlation between temperature and sensor signal was found, whereas gas flow, composition, pressure, and humidity did not have any influence on the signal. Two of the sensors were tested at different N2O concentration ranges (0-422.3, 0-50, 0-10, and 0-2 ppmv N2O) and exhibited a linear response over each range. The N2O emission dynamics from two laboratory scale sequencing batch reactors performing ammonia or nitrite oxidation were also monitored using one of the microsensors and results were compared with two other analytical methods. Results show that N2O emissions were accurately described with these microelectrodes and support their application for assessing gaseous N2O emissions from wastewater treatment systems. Advantages of the sensors as compared to conventional measurement techniques include a wider quantification range of N2O fluxes, and a single measurement system that can assess both liquid and gas-phase N2O dynamics.

  12. MEMS mass-spring-damper systems using an out-of-plane suspension scheme

    KAUST Repository

    Abdel Aziz, Ahmed Kamal Said; Sharaf, Abdel Hameed; Serry, Mohamed Yousef; Sedky, Sherif Salah

    2014-01-01

    MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) using an out-of-plane (or vertical) suspension scheme, wherein the suspensions are normal to the proof mass, are disclosed. Such out-of-plane suspension scheme helps such MEMS mass-spring-damper systems achieve inertial grade performance. Methods of fabricating out-of-plane suspensions in MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) are also disclosed.

  13. MEMS mass-spring-damper systems using an out-of-plane suspension scheme

    KAUST Repository

    Abdel Aziz, Ahmed Kamal Said

    2014-02-04

    MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) using an out-of-plane (or vertical) suspension scheme, wherein the suspensions are normal to the proof mass, are disclosed. Such out-of-plane suspension scheme helps such MEMS mass-spring-damper systems achieve inertial grade performance. Methods of fabricating out-of-plane suspensions in MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) are also disclosed.

  14. A MEMS-based, wireless, biometric-like security system

    Science.gov (United States)

    Cross, Joshua D.; Schneiter, John L.; Leiby, Grant A.; McCarter, Steven; Smith, Jeremiah; Budka, Thomas P.

    2010-04-01

    We present a system for secure identification applications that is based upon biometric-like MEMS chips. The MEMS chips have unique frequency signatures resulting from fabrication process variations. The MEMS chips possess something analogous to a "voiceprint". The chips are vacuum encapsulated, rugged, and suitable for low-cost, highvolume mass production. Furthermore, the fabrication process is fully integrated with standard CMOS fabrication methods. One is able to operate the MEMS-based identification system similarly to a conventional RFID system: the reader (essentially a custom network analyzer) detects the power reflected across a frequency spectrum from a MEMS chip in its vicinity. We demonstrate prototype "tags" - MEMS chips placed on a credit card-like substrate - to show how the system could be used in standard identification or authentication applications. We have integrated power scavenging to provide DC bias for the MEMS chips through the use of a 915 MHz source in the reader and a RF-DC conversion circuit on the tag. The system enables a high level of protection against typical RFID hacking attacks. There is no need for signal encryption, so back-end infrastructure is minimal. We believe this system would make a viable low-cost, high-security system for a variety of identification and authentication applications.

  15. Optimization and simulation of MEMS rectilinear ion trap

    Directory of Open Access Journals (Sweden)

    Huang Gang

    2015-04-01

    Full Text Available In this paper, the design of a MEMS rectilinear ion trap was optimized under simulated conditions. The size range of the MEMS rectilinear ion trap’s electrodes studied in this paper is measured at micron scale. SIMION software was used to simulate the MEMS rectilinear ion trap with different sizes and different radio-frequency signals. The ion-trapping efficiencies of the ion trap under these different simulation conditions were obtained. The ion-trapping efficiencies were compared to determine the performance of the MEMS rectilinear ion trap in different conditions and to find the optimum conditions. The simulation results show that for the ion trap at micron scale or smaller, the optimized length–width ratio was 0.8, and a higher frequency of radio-frequency signal is necessary to obtain a higher ion-trapping efficiency. These results have a guiding role in the process of developing MEMS rectilinear ion traps, and great application prospects in the research fields of the MEMS rectilinear ion trap and the MEMS mass spectrometer.

  16. The movable digital planetary from the Cruzeiro do Sul University as a distributing agent of astronomy

    Science.gov (United States)

    Voelzke, Marcos Rincon

    2012-10-01

    The Movable Digital Planetary from the Cruzeiro do Sul University has been working in order to publicize and to popularize Astronomy, in particular among students and teachers of Primary (EF) and Medium (EM) Education in municipal and state schools of the City of São Paulo, but also for the general public at large. The aim of this paper is to show and publicize the activities already undertaken by this planetary. In 2010, several presentations were recorded, such as: for the School Cruzeiro do Sul, in São Miguel Paulista, serving 161 children in the EF; Eighth Symposium on Education, Cruzeiro do Sul University, 75 students; NGO Educational Project Capuano, Anália Franco, 30 adults: Fair Student Guide in Shopping Center Norte, 455 people; NGO Association for Charitable Paulista, Burgo Paulista, 70 children; Workshop of Advanced Computing and Informatics, Cruzeiro do Sul University, 37 students; Day of Social Responsibility, Social Work in Don Bosco, Itaquera, 133 people! . In 2011 the presentations took place during the XIII Regional Meeting of Astronomy Education at Cruzeiro do Sul University, serving 112 teachers; College Cruzeiro do Sul, São Miguel Paulista, 356 children of the EF; College Brasilia from São Paulo, Anália Franco, 102 children in the EF and for the Scout Group Caramuru, São Paulo, 104 children. The applied methodology in all presentations consisted of the exhibition of two videos about Astronomy with a subsequent discussion about the presented issues. Previous surveys have shown a great interest in the majority of participants in wanting to learn more about the subject, which clearly explains the importance of education in non-formal places for the teaching of Astronomy

  17. Movable detector to search for neutrino oscillations in the BNL neutrino beam

    International Nuclear Information System (INIS)

    Bozoki, G.; Fainberg, A.; Weygand, D.; Fagg, L.; Uberall, H.; Goldberg, M.; Meadows, B.; Saenz, A.W.; Seeman, N.

    1980-01-01

    A simple, straightforward, and economic experiment utilizing a set of water Cherenkov counters is proposed to search for neutrino oscillations in the AGS neutrino beam. The detector will be movable and will be able to provide reasonable counting rates up to 2 km downstream of the pion decay tunnel. Whereas previous accelerator experiments have sought to increase the ratio l/p (with l the neutrino path length and p its momentum) by decreasing p, increasing l is suggested instead. Further, by making measurements at several different values of l with the same apparatus, many sources of systematic error are eliminated. The experiment will measure beam-associated muon- and electron-type events at each position. A change in the ratio of muon- to electron-type events as a function of position would be evidence for ν/sub μ/ + ν/sub e/ oscillations. Sensitivity in terms of (Δm) 2 (the square of the mass difference in the mass eigenstates) can be as low as 0.1 eV 2 , for full mixing, which is below the most probable value found by Reines et al for Δm 2 in their electron neutrino reactor experiment. This experiment would be parasitic, running behind the usual neutrino beam experiments, assuming the nominal beam energy (peaked at 1 GeV), and would thus make a minimal demand on AGS support. It is suggested that the first two measurements be made inside the Isabelle tunnel at the points of intersection with the AGS neutrino beam. No further excavations would be required, and the data could be taken before ISA equipment is installed

  18. Mechanical design control and implementation of a new movable diagnostic probe for the TRIUMF cyclotron

    International Nuclear Information System (INIS)

    Ries, T.C.

    1993-11-01

    A new movable probe has been installed into the TRIUMF H - cyclotron. It is intended to measure the distribution of betatron amplitudes, in the vertical plane, of the circulating beam and to scrape halo. The probe, however, may also be scanned in the radial direction. The head may be positioned vertically and horizontally to an accuracy of .002 in. The device is mechanically modular to facilitate fast and easy handling for maintenance in a radioactive area. The beam sensor on the probe head is a 1.25 in. x 3 in. x 0.003 in. tantalum foil and its overall coverage is 3.00 in. X 7.25 in. in a vertical plane orthogonal to, and crossing through the beam orbit plane. Presently its radial centre line location corresponds to a proton beam energy of about 430 MeV at radius 296 in., however, the probe device may be easily relocated to operate from any 4 in. port, and, with an adaptor port flange, may be installed into any port in the cyclotron vacuum tank. A stationary catcher below the probe path collects those electrons stripped from the H - beam and scattered out from the probe head. The probe axis is vertical and the tank aperture is narrow so a worm gear arrangement combined with a modified 'Evans' - parallel linkage mechanism is used to transform vertical rotary motion into horizontal linear motion. The actuators are dc servo motors with tachometers driven by pulse width modulated servo amplifiers. Position sensing is done by variable reluctance type absolute rotary encoders and the higher level positioning is performed by TRIMAC based control software. The precision of movement and jitter was measured in the laboratory. Examples will be given of the probe use with beam. (author). 5 refs., 3 figs

  19. A method for manufacturing a hollow mems structure

    DEFF Research Database (Denmark)

    2017-01-01

    The present invention relates to a method for manufacturing an at least partly hollow MEMS structure. In a first step one or more through-going openings is/are provided in core material. The one or more through-going openings is/are then covered by an etch-stop layer. After this step, a bottom...... further comprises the step of creating bottom and top conductors in the respective bottom and top layers. Finally, excess core material is removed in order to create the at least partly hollow MEMS structure which may include a MEMS inductor....

  20. Differential RF MEMS interwoven capacitor immune to residual stress warping

    KAUST Repository

    Elshurafa, Amro M.; Salama, Khaled N.

    2012-01-01

    A RF MEMS capacitor with an interwoven structure is designed, fabricated in the PolyMUMPS process and tested in an effort to address fabrication challenges usually faced in MEMS processes. The interwoven structure was found to offer several advantages over the typical MEMS parallel-plate design including eliminating the warping caused by residual stress, eliminating the need for etching holes, suppressing stiction, reducing parasitics and providing differential capability. The quality factor of the proposed capacitor was higher than five throughout a 2–10 GHz range and the resonant frequency was in excess of 20 GHz.

  1. The Sandia MEMS passive shock sensor : FY07 maturation activities.

    Energy Technology Data Exchange (ETDEWEB)

    Houston, Jack E.; Blecke, Jill; Mitchell, John Anthony; Wittwer, Jonathan W.; Crowson, Douglas A.; Clemens, Rebecca C.; Walraven, Jeremy Allen; Epp, David S.; Baker, Michael Sean

    2008-08-01

    This report describes activities conducted in FY07 to mature the MEMS passive shock sensor. The first chapter of the report provides motivation and background on activities that are described in detail in later chapters. The second chapter discusses concepts that are important for integrating the MEMS passive shock sensor into a system. Following these two introductory chapters, the report details modeling and design efforts, packaging, failure analysis and testing and validation. At the end of FY07, the MEMS passive shock sensor was at TRL 4.

  2. Differential RF MEMS interwoven capacitor immune to residual stress warping

    KAUST Repository

    Elshurafa, Amro M.

    2012-07-27

    A RF MEMS capacitor with an interwoven structure is designed, fabricated in the PolyMUMPS process and tested in an effort to address fabrication challenges usually faced in MEMS processes. The interwoven structure was found to offer several advantages over the typical MEMS parallel-plate design including eliminating the warping caused by residual stress, eliminating the need for etching holes, suppressing stiction, reducing parasitics and providing differential capability. The quality factor of the proposed capacitor was higher than five throughout a 2–10 GHz range and the resonant frequency was in excess of 20 GHz.

  3. High Volume Manufacturing and Field Stability of MEMS Products

    Science.gov (United States)

    Martin, Jack

    Low volume MEMS/NEMS production is practical when an attractive concept is implemented with business, manufacturing, packaging, and test support. Moving beyond this to high volume production adds requirements on design, process control, quality, product stability, market size, market maturity, capital investment, and business systems. In a broad sense, this chapter uses a case study approach: It describes and compares the silicon-based MEMS accelerometers, pressure sensors, image projection systems, and gyroscopes that are in high volume production. Although they serve several markets, these businesses have common characteristics. For example, the manufacturing lines use automated semiconductor equipment and standard material sets to make consistent products in large quantities. Standard, well controlled processes are sometimes modified for a MEMS product. However, novel processes that cannot run with standard equipment and material sets are avoided when possible. This reliance on semiconductor tools, as well as the organizational practices required to manufacture clean, particle-free products partially explains why the MEMS market leaders are integrated circuit manufacturers. There are other factors. MEMS and NEMS are enabling technologies, so it can take several years for high volume applications to develop. Indeed, market size is usually a strong function of price. This becomes a vicious circle, because low price requires low cost - a result that is normally achieved only after a product is in high volume production. During the early years, IC companies reduced cost and financial risk by using existing facilities for low volume MEMS production. As a result, product architectures are partially determined by capabilities developed for previous products. This chapter includes a discussion of MEMS product architecture with particular attention to the impact of electronic integration, packaging, and surfaces. Packaging and testing are critical, because they are

  4. Mathematical analysis of partial differential equations modeling electrostatic MEMS

    CERN Document Server

    Esposito, Pierpaolo; Guo, Yujin

    2010-01-01

    Micro- and nanoelectromechanical systems (MEMS and NEMS), which combine electronics with miniature-size mechanical devices, are essential components of modern technology. It is the mathematical model describing "electrostatically actuated" MEMS that is addressed in this monograph. Even the simplified models that the authors deal with still lead to very interesting second- and fourth-order nonlinear elliptic equations (in the stationary case) and to nonlinear parabolic equations (in the dynamic case). While nonlinear eigenvalue problems-where the stationary MEMS models fit-are a well-developed

  5. Localized electron transfer rates and microelectrode-based enrichment of microbial communities within a phototrophic microbial mat

    Directory of Open Access Journals (Sweden)

    Jerome eBabauta

    2014-01-01

    Full Text Available Phototrophic microbial mats frequently exhibit sharp, light-dependent redox gradients that regulate microbial respiration on specific electron acceptors as a function of depth. In this work, a benthic phototrophic microbial mat from Hot Lake, a hypersaline, epsomitic lake located near Oroville in north-central Washington, was used to develop a microscale electrochemical method to study local electron transfer processes within the mat. To characterize the physicochemical variables influencing electron transfer, we initially quantified redox potential, pH and dissolved oxygen gradients by depth in the mat under photic and aphotic conditions. We further demonstrated that power output of a mat fuel cell was light-dependent. To study local electron transfer processes, we deployed a microscale electrode (microelectrode with tip size ~20 µm. To enrich a subset of microorganisms capable of interacting with the microelectrode, we anodically polarized the microelectrode in the mat. Subsequently, to characterize the microelectrode-associated community and compare it to the neighboring mat community, we performed amplicon sequencing of the V1-V3 region of the 16S gene. Differences in Bray-Curtis beta diversity, illustrated by large changes in relative abundance at the phylum level, suggested successful enrichment of specific mat community members on the microelectrode surface. The microelectrode-associated community exhibited substantially reduced alpha diversity and elevated relative abundances of Prosthecochloris, Loktanella, Catellibacterium, other unclassified members of Rhodobacteraceae, Thiomicrospira, and Limnobacter, compared with the community at an equivalent depth in the mat. Our results suggest that local electron transfer to an anodically polarized microelectrode selected for a specific microbial population, with substantially more abundance and diversity of sulfur-oxidizing phylotypes compared with the neighboring mat community.

  6. Localized electron transfer rates and microelectrode-based enrichment of microbial communities within a phototrophic microbial mat.

    Science.gov (United States)

    Babauta, Jerome T; Atci, Erhan; Ha, Phuc T; Lindemann, Stephen R; Ewing, Timothy; Call, Douglas R; Fredrickson, James K; Beyenal, Haluk

    2014-01-01

    Phototrophic microbial mats frequently exhibit sharp, light-dependent redox gradients that regulate microbial respiration on specific electron acceptors as a function of depth. In this work, a benthic phototrophic microbial mat from Hot Lake, a hypersaline, epsomitic lake located near Oroville in north-central Washington, was used to develop a microscale electrochemical method to study local electron transfer processes within the mat. To characterize the physicochemical variables influencing electron transfer, we initially quantified redox potential, pH, and dissolved oxygen gradients by depth in the mat under photic and aphotic conditions. We further demonstrated that power output of a mat fuel cell was light-dependent. To study local electron transfer processes, we deployed a microscale electrode (microelectrode) with tip size ~20 μm. To enrich a subset of microorganisms capable of interacting with the microelectrode, we anodically polarized the microelectrode at depth in the mat. Subsequently, to characterize the microelectrode-associated community and compare it to the neighboring mat community, we performed amplicon sequencing of the V1-V3 region of the 16S gene. Differences in Bray-Curtis beta diversity, illustrated by large changes in relative abundance at the phylum level, suggested successful enrichment of specific mat community members on the microelectrode surface. The microelectrode-associated community exhibited substantially reduced alpha diversity and elevated relative abundances of Prosthecochloris, Loktanella, Catellibacterium, other unclassified members of Rhodobacteraceae, Thiomicrospira, and Limnobacter, compared with the community at an equivalent depth in the mat. Our results suggest that local electron transfer to an anodically polarized microelectrode selected for a specific microbial population, with substantially more abundance and diversity of sulfur-oxidizing phylotypes compared with the neighboring mat community.

  7. Superhydrophobic Surface Coatings for Microfluidics and MEMs.

    Energy Technology Data Exchange (ETDEWEB)

    Branson, Eric D.; Singh, Seema [Sandia National Laboratories, Livermore, CA; Houston, Jack E.; van Swol, Frank B.; Brinker, C. Jeffrey

    2006-11-01

    Low solid interfacial energy and fractally rough surface topography confer to Lotus plants superhydrophobic (SH) properties like high contact angles, rolling and bouncing of liquid droplets, and self-cleaning of particle contaminants. This project exploits the porous fractal structure of a novel, synthetic SH surface for aerosol collection, its self-cleaning properties for particle concentration, and its slippery nature 3 to enhance the performance of fluidic and MEMS devices. We propose to understand fundamentally the conditions needed to cause liquid droplets to roll rather than flow/slide on a surface and how this %22rolling transition%22 influences the boundary condition describing fluid flow in a pipe or micro-channel. Rolling of droplets is important for aerosol collection strategies because it allows trapped particles to be concentrated and transported in liquid droplets with no need for a pre-defined/micromachined fluidic architecture. The fluid/solid boundary condition is important because it governs flow resistance and rheology and establishes the fluid velocity profile. Although many research groups are exploring SH surfaces, our team is the first to unambiguously determine their effects on fluid flow and rheology. SH surfaces could impact all future SNL designs of collectors, fluidic devices, MEMS, and NEMS. Interfaced with inertial focusing aerosol collectors, SH surfaces would allow size-specific particle populations to be collected, concentrated, and transported to a fluidic interface without loss. In microfluidic systems, we expect to reduce the energy/power required to pump fluids and actuate MEMS. Plug-like (rather than parabolic) velocity profiles can greatly improve resolution of chip-based separations and enable unprecedented control of concentration profiles and residence times in fluidic-based micro-reactors. Patterned SH/hydrophilic channels could induce mixing in microchannels and enable development of microflow control elements

  8. Strong Motion Seismograph Based On MEMS Accelerometer

    Science.gov (United States)

    Teng, Y.; Hu, X.

    2013-12-01

    The MEMS strong motion seismograph we developed used the modularization method to design its software and hardware.It can fit various needs in different application situation.The hardware of the instrument is composed of a MEMS accelerometer,a control processor system,a data-storage system,a wired real-time data transmission system by IP network,a wireless data transmission module by 3G broadband,a GPS calibration module and power supply system with a large-volumn lithium battery in it. Among it,the seismograph's sensor adopted a three-axis with 14-bit high resolution and digital output MEMS accelerometer.Its noise level just reach about 99μg/√Hz and ×2g to ×8g dynamically selectable full-scale.Its output data rates from 1.56Hz to 800Hz. Its maximum current consumption is merely 165μA,and the device is so small that it is available in a 3mm×3mm×1mm QFN package. Furthermore,there is access to both low pass filtered data as well as high pass filtered data,which minimizes the data analysis required for earthquake signal detection. So,the data post-processing can be simplified. Controlling process system adopts a 32-bit low power consumption embedded ARM9 processor-S3C2440 and is based on the Linux operation system.The processor's operating clock at 400MHz.The controlling system's main memory is a 64MB SDRAM with a 256MB flash-memory.Besides,an external high-capacity SD card data memory can be easily added.So the system can meet the requirements for data acquisition,data processing,data transmission,data storage,and so on. Both wired and wireless network can satisfy remote real-time monitoring, data transmission,system maintenance,status monitoring or updating software.Linux was embedded and multi-layer designed conception was used.The code, including sensor hardware driver,the data acquisition,earthquake setting out and so on,was written on medium layer.The hardware driver consist of IIC-Bus interface driver, IO driver and asynchronous notification driver. The

  9. Feedback Control of MEMS to Atoms

    CERN Document Server

    Shapiro, Benjamin

    2012-01-01

    Feedback Control of MEMS to Atoms illustrates the use of control and control systems as an essential part of functioning integrated miniaturized systems. The book is organized according to the dimensional scale of the problem, starting with microscale systems and ending with atomic-scale systems. Similar to macroscale machines and processes, control systems can play a major role in improving the performance of micro- and nanoscale systems and in enabling new capabilities that would otherwise not be possible. The majority of problems at these scales present many new challenges that go beyond the current state-of-the-art in control theory and engineering. This is a result of the multidisciplinary nature of micro/nanotechnology, which requires the merging of control engineering with physics, biology and chemistry. This book: Shows how the utilization of feedback control in nanotechnology instrumentation can yield results far better than passive systems can Discusses the application of control systems to problems...

  10. A MEMS turbine prototype for respiration harvesting

    Science.gov (United States)

    Goreke, U.; Habibiabad, S.; Azgin, K.; Beyaz, M. I.

    2015-12-01

    The design, manufacturing, and performance characterization of a MEMS-scale turbine prototype is reported. The turbine is designed for integration into a respiration harvester that can convert normal human breathing into electrical power through electromagnetic induction. The device measures 10 mm in radius, and employs 12 blades located around the turbine periphery along with ball bearings around the center. Finite element simulations showed that an average torque of 3.07 μNm is induced at 12 lpm airflow rate, which lies in normal breathing levels. The turbine and a test package were manufactured using CNC milling on PMMA. Tests were performed at respiration flow rates between 5-25 lpm. The highest rotational speed was measured to be 9.84 krpm at 25 lpm, resulting in 8.96 mbar pressure drop across the device and 370 mW actuation power.

  11. Torsion based universal MEMS logic device

    KAUST Repository

    Ilyas, Saad; Carreno, Armando Arpys Arevalo; Bayes, Ernesto; Foulds, Ian G.; Younis, Mohammad I.

    2015-01-01

    In this work we demonstrate torsion based complementary MEMS logic device, which is capable, of performing INVERTER, AND, NAND, NOR, and OR gates using one physical structure within an operating range of 0-10 volts. It can also perform XOR and XNOR with one access inverter using the same structure with different electrical interconnects. The paper presents modeling, fabrication and experimental calculations of various performance features of the device including lifetime, power consumption and resonance frequency. The fabricated device is 535 μm by 150 μm with a gap of 1.92 μm and a resonant frequency of 6.51 kHz. The device is capable of performing the switching operation with a frequency of 1 kHz.

  12. Highly Tunable Narrow Bandpass MEMS Filter

    KAUST Repository

    Hafiz, Md Abdullah Al

    2017-07-07

    We demonstrate a proof-of-concept highly tunable narrow bandpass filter based on electrothermally and electrostatically actuated microelectromechanical-system (MEMS) resonators. The device consists of two mechanically uncoupled clamped-clamped arch resonators, designed such that their resonance frequencies are independently tuned to obtain the desired narrow passband. Through the electrothermal and electrostatic actuation, the stiffness of the structures is highly tunable. We experimentally demonstrate significant percentage tuning (~125%) of the filter center frequency by varying the applied electrothermal voltages to the resonating structures, while maintaining a narrow passband of 550 ± 50 Hz, a stopband rejection of >17 dB, and a passband ripple ≤ 2.5 dB. An analytical model based on the Euler-Bernoulli beam theory is used to confirm the behavior of the filter, and the origin of the high tunability using electrothermal actuation is discussed.

  13. Integrated electronics and fluidic MEMS for bioengineering

    Science.gov (United States)

    Fok, Ho Him Raymond

    Microelectromechanical systems (MEMS) and microelectronics have become enabling technologies for many research areas. This dissertation presents the use of fluidic MEMS and microelectronics for bioengineering applications. In particular, the versatility of MEMS and microelectronics is highlighted by the presentation of two different applications, one for in-vitro study of nano-scale dynamics during cell division and one for in-vivo monitoring of biological activities at the cellular level. The first application of an integrated system discussed in this dissertation is to utilize fluidic MEMS for studying dynamics in the mitotic spindle, which could lead to better chemotherapeutic treatments for cancer patients. Previous work has developed the use of electrokinetic phenomena on the surface of a glass-based platform to assemble microtubules, the building blocks of mitotic spindles. Nevertheless, there are two important limitations of this type of platform. First, an unconventional microfabrication process is necessary for the glass-based platform, which limits the utility of this platform. In order to overcome this limitation, in this dissertation a convenient microfluidic system is fabricated using a negative photoresist called SU-8. The fabrication process for the SU-8-based system is compatible with other fabrication techniques used in developing microelectronics, and this compatibility is essential for integrating electronics for studying dynamics in the mitotic spindle. The second limitation of the previously-developed glass-based platform is its lack of bio-compatibility. For example, microtubules strongly interact with the surface of the glass-based platform, thereby hindering the study of dynamics in the mitotic spindle. This dissertation presents a novel approach for assembling microtubules away from the surface of the platform, and a fabrication process is developed to assemble microtubules between two self-aligned thin film electrodes on thick SU-8

  14. Torsion based universal MEMS logic device

    KAUST Repository

    Ilyas, Saad

    2015-10-28

    In this work we demonstrate torsion based complementary MEMS logic device, which is capable, of performing INVERTER, AND, NAND, NOR, and OR gates using one physical structure within an operating range of 0-10 volts. It can also perform XOR and XNOR with one access inverter using the same structure with different electrical interconnects. The paper presents modeling, fabrication and experimental calculations of various performance features of the device including lifetime, power consumption and resonance frequency. The fabricated device is 535 μm by 150 μm with a gap of 1.92 μm and a resonant frequency of 6.51 kHz. The device is capable of performing the switching operation with a frequency of 1 kHz.

  15. Wideband MEMS Resonator Using Multifrequency Excitation

    KAUST Repository

    Jaber, Nizar; Ramini, Abdallah; Al Hennawi, Qais M.; Younis, Mohammad I.

    2016-01-01

    We demonstrate the excitation of combination resonances of additive and subtractive types and their exploitations to realize a large bandwidth micro-machined resonator of large amplitude even at higher harmonic modes of vibrations. The investigation is conducted on a Microelectromechanical systems (MEMS) clamped-clamped microbeam fabricated using polyimide as a structural layer coated with nickel from top and chromium and gold layers from bottom. The microbeam is excited by a two-source harmonic excitation, where the first frequency source is swept around the targeted resonance (first or third mode of vibration) while the second source frequency is kept fixed. We report for the first time a large bandwidth and large amplitude response near the higher order modes of vibration. Also, we show that by properly tuning the frequency and amplitude of the excitation force, the frequency bandwidth of the resonator is controlled.

  16. Wideband MEMS Resonator Using Multifrequency Excitation

    KAUST Repository

    Jaber, Nizar

    2016-03-09

    We demonstrate the excitation of combination resonances of additive and subtractive types and their exploitations to realize a large bandwidth micro-machined resonator of large amplitude even at higher harmonic modes of vibrations. The investigation is conducted on a Microelectromechanical systems (MEMS) clamped-clamped microbeam fabricated using polyimide as a structural layer coated with nickel from top and chromium and gold layers from bottom. The microbeam is excited by a two-source harmonic excitation, where the first frequency source is swept around the targeted resonance (first or third mode of vibration) while the second source frequency is kept fixed. We report for the first time a large bandwidth and large amplitude response near the higher order modes of vibration. Also, we show that by properly tuning the frequency and amplitude of the excitation force, the frequency bandwidth of the resonator is controlled.

  17. 1015 PTT Segment MEMS DM Development, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — Microelectromechanical systems (MEMS) technology has the potential to create deformable mirrors (DM) with more than 10^4 actuators with size, weight, and power...

  18. Picometer-Resolution MEMS Segmented DM, Phase II

    Data.gov (United States)

    National Aeronautics and Space Administration — Microelectromechanical systems (MEMS) technology has the potential to create deformable mirrors (DM) with 10^4 actuators that have size, weight, and power...

  19. Planetary-Whigs: Optical MEMS-Based Seismometer, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — During this Phase I, Michigan Aerospace Corporation will adapt the design of an optical MEMS seismometer for lunar and other planetary science instrumentation. The...

  20. Investigation of a delayed feedback controller of MEMS resonators

    KAUST Repository

    Masri, Karim M.; Younis, Mohammad I.; Shao, Shuai

    2013-01-01

    Controlling mechanical systems is an important branch of mechanical engineering. Several techniques have been used to control Microelectromechanical systems (MEMS) resonators. In this paper, we study the effect of a delayed feedback controller

  1. CONTROL OF BOUNCING IN RF MEMS SWITCHES USING DOUBLE ELECTRODE

    KAUST Repository

    Abdul Rahim, Farhan

    2014-01-01

    MEMS based mechanical switches are seen to be the likely replacements for CMOS based switches due to the several advantages that these mechanical switches have over CMOS switches. Mechanical switches can be used in systems under extreme conditions

  2. A MEMS coupled resonator for frequency filtering in air

    KAUST Repository

    Ilyas, Saad; Jaber, Nizar; Younis, Mohammad I.

    2018-01-01

    We present design, fabrication, and characterization of a mechanically coupled MEMS H resonator capable of performing simultaneous mechanical amplification and filtering in air. The device comprises of two doubly clamped polyimide microbeams joined

  3. Initially Imperfect MEMS Microplates Under Electrostatic Actuation: Theory and Experiment

    KAUST Repository

    Saghir, Shahid; Bellaredj, Mohammed Lamine Faycal; Younis, Mohammad I.

    2016-01-01

    Microplates are building blocks of many Micro-Electro-Mechanical Systems (MEMS). It is common for them to undergo imperfections due to residual stresses caused by the micro fabrication process. Such plates are essentially different from perfectly

  4. MEMS-based transmission lines for microwave applications

    Science.gov (United States)

    Wu, Qun; Fu, Jiahui; Gu, Xuemai; Shi, Huajuan; Lee, Jongchul

    2003-04-01

    This paper mainly presents a briefly review for recent progress in MEMS-based transmission lines for use in microwave and millimeterwave range. MEMS-based transmission lines including different transmission line structure such as membrane-supported microstrip line microstrip line, coplanar microshield transmission line, LIGA micromachined planar transmission line, micromachined waveguides and coplanar waveguide are discussed. MEMS-based transmission lines are characterized by low propagation loss, wide operation frequency band, low dispersion and high quality factor, in addition, the fabrication is compatible with traditional processing of integrated circuits (IC"s). The emergence of MEMS-based transmission lines provided a solution for miniaturizing microwave system and monolithic microwave integrated circuits.

  5. MEMS Sensor Arrays for Cryogenic Propellant Applications, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — KWJ offers this proposal for a low-power, practical and versatile MEMS sensor platform for NASA applications. The proposed nano-sensor platform is ultra-low power...

  6. Control of Bouncing in MEMS Switches Using Double Electrodes

    KAUST Repository

    Abdul Rahim, Farhan; Younis, Mohammad I.

    2016-01-01

    This paper presents a novel way of controlling the bouncing phenomenon commonly present in the Radio Frequency Microelectromechanical Systems (RF MEMS) switches using a double-electrode configuration. The paper discusses modeling bouncing using both

  7. MEMS/Electronic Device Design and Characterization Facility

    Data.gov (United States)

    Federal Laboratory Consortium — This facility allows DoD to design and characterize state-of-the-art microelectromechanical systems (MEMS) and electronic devices. Device designers develop their own...

  8. Picometer-Resolution MEMS Segmented DM, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — Microelectromechanical systems (MEMS) technology has the potential to create deformable mirrors (DM) with 10^4 actuators that have size, weight, and power...

  9. High Speed Magnetostrictive MEMS Actuated Mirror Deflectors, Phase II

    Data.gov (United States)

    National Aeronautics and Space Administration — The main goal of this proposal is to develop high speed magnetostrictive and MEMS actuators for rapidly deflecting or deforming mirrors. High speed, light-weight,...

  10. RF MEMS Fractal Capacitors With High Self-Resonant Frequencies

    KAUST Repository

    Elshurafa, Amro M.; Emira, Ahmed; Radwan, Ahmed Gomaa; Salama, Khaled N.

    2012-01-01

    This letter demonstrates RF microelectromechanical systems (MEMS) fractal capacitors possessing the highest reported self-resonant frequencies (SRFs) in PolyMUMPS to date. Explicitly, measurement results show SRFs beyond 20 GHz. Furthermore, quality

  11. Designing Computer Systems with MEMS-Based Storage

    National Research Council Canada - National Science Library

    Schlosser, Steven

    2000-01-01

    .... An exciting new storage technology based on microelectromechanical systems (MEMS) is poised to fill a large portion of this performance gap, significantly reduce power consumption, and enable many new classes of applications...

  12. System integration design in MEMS – A case study of ...

    Indian Academy of Sciences (India)

    solutions in MEMS technology is very much felt that combine single chip integration .... chip are being used for temperature compensation and to balance the bridge configuration. ..... to the offset voltage, which reduces the span of the sensor.

  13. Inhibition of the cluster of differentiation 14 innate immunity pathway with IAXO-101 improves chronic microelectrode performance

    Science.gov (United States)

    Hermann, John K.; Ravikumar, Madhumitha; Shoffstall, Andrew J.; Ereifej, Evon S.; Kovach, Kyle M.; Chang, Jeremy; Soffer, Arielle; Wong, Chun; Srivastava, Vishnupriya; Smith, Patrick; Protasiewicz, Grace; Jiang, Jingle; Selkirk, Stephen M.; Miller, Robert H.; Sidik, Steven; Ziats, Nicholas P.; Taylor, Dawn M.; Capadona, Jeffrey R.

    2018-04-01

    Objective. Neuroinflammatory mechanisms are hypothesized to contribute to intracortical microelectrode failures. The cluster of differentiation 14 (CD14) molecule is an innate immunity receptor involved in the recognition of pathogens and tissue damage to promote inflammation. The goal of the study was to investigate the effect of CD14 inhibition on intracortical microelectrode recording performance and tissue integration. Approach. Mice implanted with intracortical microelectrodes in the motor cortex underwent electrophysiological characterization for 16 weeks, followed by endpoint histology. Three conditions were examined: (1) wildtype control mice, (2) knockout mice lacking CD14, and (3) wildtype control mice administered a small molecule inhibitor to CD14 called IAXO-101. Main results. The CD14 knockout mice exhibited acute but not chronic improvements in intracortical microelectrode performance without significant differences in endpoint histology. Mice receiving IAXO-101 exhibited significant improvements in recording performance over the entire 16 week duration without significant differences in endpoint histology. Significance. Full removal of CD14 is beneficial at acute time ranges, but limited CD14 signaling is beneficial at chronic time ranges. Innate immunity receptor inhibition strategies have the potential to improve long-term intracortical microelectrode performance.

  14. The Registration of Special Notarial Bonds under the Security by Means of Movable Property Act and the Publicity Principle: Lessons from Developments in Belgium

    Directory of Open Access Journals (Sweden)

    Lefa

    2018-01-01

    Full Text Available Many people do not own immovable property to offer as security but do have movable property which can be offered as security for the repayment of a debt. In today's world, where the costs of a motor car can exceed that of a house, the increasing value of movable things makes them popular and appropriate security objects. Under the common law pledge, delivery of the movable property from the pledgor (the debtor to the pledgee (the creditor has to take place in order for the pledgee to acquire a real security right in the property. Delivery of the property is aimed at ensuring compliance with the publicity principle. The principle of publicity entails that the existence of a real security must be known to the public. With the aim of promoting commerce, certain countries have taken the initiative in reforming their laws on pledge to allow the debtor to retain possession of the movable property that serves as security. Furthermore, technology has advanced to a level where national registration systems which can be accessed easily and at minimal cost can be established. The South African legislature enacted the Security by Means of Movable Property Act 57 of 1993 which makes provision for a pledge without possession. This Act deemed a duly registered notarial bond over specified movable property to have been delivered as if delivery had in fact taken place, thereby substituting the common law delivery requirement with registration in the Deeds Office. On 30 May 2013 the Belgian House of Representatives adopted a Belgian Pledge Act which allows for a non-possessory pledge on movable property subject to registration in a newly created public register called the Electronic Pledge Register. This article therefore examines the efficacy of the registration system of special notarial bonds in South African law and whether this form of registration complies with the publicity principle looking at the developments of a computerised registration system taking

  15. MEMS Reliability: Infrastructure, Test Structures, Experiments, and Failure Modes

    Energy Technology Data Exchange (ETDEWEB)

    TANNER,DANELLE M.; SMITH,NORMAN F.; IRWIN,LLOYD W.; EATON,WILLIAM P.; HELGESEN,KAREN SUE; CLEMENT,J. JOSEPH; MILLER,WILLIAM M.; MILLER,SAMUEL L.; DUGGER,MICHAEL T.; WALRAVEN,JEREMY A.; PETERSON,KENNETH A.

    2000-01-01

    The burgeoning new technology of Micro-Electro-Mechanical Systems (MEMS) shows great promise in the weapons arena. We can now conceive of micro-gyros, micro-surety systems, and micro-navigators that are extremely small and inexpensive. Do we want to use this new technology in critical applications such as nuclear weapons? This question drove us to understand the reliability and failure mechanisms of silicon surface-micromachined MEMS. Development of a testing infrastructure was a crucial step to perform reliability experiments on MEMS devices and will be reported here. In addition, reliability test structures have been designed and characterized. Many experiments were performed to investigate failure modes and specifically those in different environments (humidity, temperature, shock, vibration, and storage). A predictive reliability model for wear of rubbing surfaces in microengines was developed. The root causes of failure for operating and non-operating MEMS are discussed. The major failure mechanism for operating MEMS was wear of the polysilicon rubbing surfaces. Reliability design rules for future MEMS devices are established.

  16. Development of the micro pixel chamber based on MEMS technology

    Science.gov (United States)

    Takemura, T.; Takada, A.; Kishimoto, T.; Komura, S.; Kubo, H.; Matsuoka, Y.; Miuchi, K.; Miyamoto, S.; Mizumoto, T.; Mizumura, Y.; Motomura, T.; Nakamasu, Y.; Nakamura, K.; Oda, M.; Ohta, K.; Parker, J. D.; Sawano, T.; Sonoda, S.; Tanimori, T.; Tomono, D.; Yoshikawa, K.

    2018-02-01

    Micro pixel chambers (μ-PIC) are gaseous two-dimensional imaging detectors originally manufactured using printed circuit board (PCB) technology. They are used in MeV gamma-ray astronomy, medicalimaging, neutron imaging, the search for dark matter, and dose monitoring. The position resolution of the present μ-PIC is approximately 120 μm (RMS), however some applications require a fine position resolution of less than 100 μm. To this end, we have started to develop a μ-PIC based on micro electro mechanical system (MEMS) technology, which provides better manufacturing accuracy than PCB technology. Our simulation predicted the gains of MEMS μ-PICs to be twice those of PCB μ-PICs at the same anode voltage. We manufactured two MEMS μ-PICs and tested them to study their behavior. In these experiments, we successfully operated the fabricatedMEMS μ-PICs and we achieved a maximum gain of approximately 7×103 and collected their energy spectra under irradiation of X-rays from 55Fe. However, the measured gains of the MEMS μ-PICs were less than half of the values predicted in the simulations. We postulated that the gains of the MEMS μ-PICs are diminished by the effect of the silicon used as a semiconducting substrate.

  17. Digital reflection holography based systems development for MEMS testing

    Science.gov (United States)

    Singh, Vijay Raj; Liansheng, Sui; Asundi, Anand

    2010-05-01

    MEMS are tiny mechanical devices that are built onto semiconductor chips and are measured in micrometers and nanometers. Testing of MEMS device is an important part in carrying out their functional assessment and reliability analysis. Development of systems based on digital holography (DH) for MEMS inspection and characterization is presented in this paper. Two DH reflection systems, table-top and handheld types, are developed depending on the MEMS measurement requirements and their capabilities are presented. The methodologies for the systems are developed for 3D profile inspection and static & dynamic measurements, which is further integrated with in-house developed software that provides the measurement results in near real time. The applications of the developed systems are demonstrated for different MEMS devices for 3D profile inspection, static deformation/deflection measurements and vibration analysis. The developed systems are well suitable for the testing of MEMS and Microsystems samples, with full-field, static & dynamic inspection as well as to monitor micro-fabrication process.

  18. Advanced MEMS systems for optical communication and imaging

    International Nuclear Information System (INIS)

    Horenstein, M N; Sumner, R; Freedman, D S; Datta, M; Kani, N; Miller, P; Stewart, J B; Cornelissen, S

    2011-01-01

    Optical communication and adaptive optics have emerged as two important uses of micro-electromechanical (MEMS) devices based on electrostatic actuation. Each application uses a mirror whose surface is altered by applying voltages of up to 300 V. Previous generations of adaptive-optic mirrors were large (∼1 m) and required the use of piezoelectric transducers. Beginning in the mid-1990s, a new class of small MEMS mirrors (∼1 cm) were developed. These mirrors are now a commercially available, mature technology. This paper describes three advanced applications of MEMS mirrors. The first is a mirror used for corona-graphic imaging, whereby an interferometric telescope blocks the direct light from a distant star so that nearby objects such as planets can be seen. We have developed a key component of the system: a 144-channel, fully-scalable, high-voltage multiplexer that reduces power consumption to only a few hundred milliwatts. In a second application, a MEMS mirror comprises part of a two-way optical communication system in which only one node emits a laser beam. The other node is passive, incorporating a retro-reflective, electrostatic MEMS mirror that digitally encodes the reflected beam. In a third application, the short (∼100-ns) pulses of a commercially-available laser rangefinder are returned by the MEMS mirror as a digital data stream. Suitable low-power drive systems comprise part of the system design.

  19. RF MEMS: status of the industry and roadmaps

    Science.gov (United States)

    Bouchaud, Jeremie; Wicht, Henning

    2005-01-01

    Microsystems for Radio Frequency applications, known as RF MEMS, have entered the commercialization phase in 2003. Bulk Acoustic Wave filters are already produced in series and first commercial samples of switches are available. On the other hand, reliability and packaging problems are still a major hurdle especially for switches and tunable capacitors. Will RF MEMS hold their promise to be one of the future major businesses for MEMS? The presentation will give an overview on RF MEMS applications and market players. WTC will highlight technical challenges that still have to be solved to open mass markets such as mobile telephony and WLAN. WTC will also present applications of RF MEMS and opportunities in niche markets with high added value like military and space applications. WTC will provide a regional analysis and compare R&D focus and public funding situation in North America, Europe and Asia. Finally, WTC will present an updated product roadmap market forecast for RF MEMS devices for the 2004-2008 time period.

  20. Development of a Multi-User Polyimide-MEMS Fabrication Process and its Application to MicroHotplates

    KAUST Repository

    Lizardo, Ernesto B.

    2013-01-01

    Micro-electro-mechanical systems (MEMS) became possible thanks to the silicon based technology used to fabricate integrated circuits. Originally, MEMS fabrication was limited to silicon based techniques and materials, but the expansion of MEMS

  1. Crash energy management on the base of Movable cellular automata method

    Science.gov (United States)

    Psakhie, Serguei; Dmitriev, Andrei; Shilko, Evgueni; Tatarintsev, Evgueni; Korostelev, Serguei

    2001-06-01

    One of the main problems of materials science is increasing of structure's viability under dynamic loading. In general, a solution is the management of transformation of the energy of loading to the energy of destroying of the least important parts and details of the structure. It has to be noted that similar problem also exists in materials science, since a majority of modern materials are heterogeneous and have a complex internal structure. To optimize this structure for working under dynamic loading it is necessary to take into account the redistribution of elastic energy including phase transformation, generation and accumulation of micro-damages, etc. As far as real experiments on destroying the complex objects are sufficiently expensive and getting of detailed information is often associates with essential difficulties, the methods of computer modeling are used in solving the similar problems. As a rule, these are the methods of continuum mechanics. Although essential achievements have been obtained on the basis of these methods the continuum approach has several limitations, connected first of all with the possibility of description of generation of damages, formation and development of cracks and mass mixing effects. These problems may be solved on the basis of the Movable Cellular Automata (MCA) method, which has been successfully used for modeling fracture of the different material and structures In the paper behavior and peculiarities of failure of complex structures and materials under dynamic loading are studied on the basis of computer modeling. The results shown that sometimes even small changes of the internal structure leads to the significant increasing of the viability of the complex structures and materials. It is due to the elastic energy flux change over during the dynamical loading. This effect may be explained by the fact that elastic energy fluxes define the current stress concentration. Namely, because the area of inclusions are subjected

  2. Electrochemical decontamination of metallic surfaces by means of a movable electrode

    International Nuclear Information System (INIS)

    Mihai, F.; Nicu, M.; Cazan, L.; Turcanu, C.

    1998-01-01

    Electrochemical decontamination can be considered to be a decontamination assisted by an electrochemical field. The method is applied to the metallic surface decontamination for contaminants of any physico-chemical nature. The physico-chemical phenomenon that is the basis for the electrochemical methods is the anodic layer dissolution. By dissolution of the superficial layer any radioactive contaminant on the surface or entrapped within the surface oxide is eliminated. Electrochemical decontamination, also known as electropolishing, involves the use of the object to be cleaned as an anode in an electrochemical cell. The passage of current results in anodic dissolution of the surface material. Generally, there are many methods of application for electropolishing. The most common method is immersing the object to be decontaminated in a tank filled with a suitable electrolyte. The electrochemical method with movable electrode involves the use of 'in situ' mobile devices that are able to electropolish punctual surfaces in places difficult to access. The advantages are the simplicity of the setup, short times of application and reduced waste volumes. Phosphoric and sulphuric acid mixture is used as the electrolyte in electropolishing because of its stability, safety and applicability to a variety of alloy systems. The method was applied to decontaminate carbon steel, aluminium and copper. Used contaminants are mixtures of 60 Co and 134 Cs; 60 Co and 65 Zn; 60 Co, 65 Zn and 134 Cs. After preparation, the samples were kept in laboratory conditions about one month, to simulate real conditions and to let the chemical reactions between contaminant and sample material constitution to complete. To calculate decontamination factor characteristic for each studied decontamination method the following radiometric measurements are necessary: - activity measurement after radioisotope solution contamination representing initial activity Λ in ; - activity measurement after

  3. Study of technical and economical feasibility for implementation of a movable unit for treatment of industrial effluents with electron beam

    International Nuclear Information System (INIS)

    Rela, Carolina Sciamarelli

    2006-01-01

    The treatment of industrial effluents is a practice that is disseminating in accelerated rhythm, of contributing to reinforce the public image, through the combat of the pollution, it brings economical advantages allowing the companies the reuse of the treated water in their own processes. The liquid effluent treatment technique studied in the present work is the one that uses the chemical oxidation/reduction standing out the use of the electron beam (e.b.) radiation. This technique uses an advanced oxidation process, generating radicals highly reagents that provoke the oxidation, reduction, dissociation and degradation in composed organic and exercising lethal effect in general in the microorganisms and parasites. In this work a conceptual and basic project of a movable unit of effluents treatment using electron beam radiation process was developed, in order that the unit moves until the treatment point, where the effluent is produced, facilitating the logistics. A technical and economical feasibility study was also elaborated allowing data on the capacity and cost of effluents processing to consolidate the values of the necessary investments to be presented to foundations organs for the construction of a movable unit. The results of the studies demonstrated that it is technically viable attending the pertinent legislation of Brazil, in the aspects of Radiation Protection and transport limit capacity. The unitary cost of the e.b. radiation processing in the movable unit was shown more expensive than in the fixed unit, the reason is the decrease of the efficiency of the interaction of the incident electrons in the effluent, due to the reduction of electron energy operation time of the unit. (author)

  4. The research and development of inclination angle magnetic fluid detector with a movable sensing element based on permanent magnets

    Energy Technology Data Exchange (ETDEWEB)

    Lagutkina, D.Yu., E-mail: Lagutkina_D@mail.ru; Saikin, M.S., E-mail: saikinms@mail.ru

    2017-06-01

    The article presents an account on some new designs, which have been developed for the magnetic fluid sensor with a movable sensor based on permanent magnets with the support of Ivanovo State Power Engineering University. The research carried out is aimed at elucidating the influence of the detector sensing element on its operating performance. - Highlights: • In order to conduct a careful research of IAMFD designs operating performance the algorithm was applied to look into the SE suspension force dependencies on its spatial position. • According to this algorithm, the value of the sensitive element suspension force is obtained with use of the MF attraction force of the to the permanent magnet.

  5. MEMS packaging with etching and thinning of lid wafer to form lids and expose device wafer bond pads

    Science.gov (United States)

    Chanchani, Rajen; Nordquist, Christopher; Olsson, Roy H; Peterson, Tracy C; Shul, Randy J; Ahlers, Catalina; Plut, Thomas A; Patrizi, Gary A

    2013-12-03

    In wafer-level packaging of microelectromechanical (MEMS) devices a lid wafer is bonded to a MEMS wafer in a predermined aligned relationship. Portions of the lid wafer are removed to separate the lid wafer into lid portions that respectively correspond in alignment with MEMS devices on the MEMS wafer, and to expose areas of the MEMS wafer that respectively contain sets of bond pads respectively coupled to the MEMS devices.

  6. Low-loss microelectrodes fabricated using reverse-side exposure for a tunable ferroelectric capacitor application

    Science.gov (United States)

    Yoon, Yong-Kyu; Stevenson Kenney, J.; Hunt, Andrew T.; Allen, Mark G.

    2006-02-01

    Narrowly spaced thick microelectrodes are fabricated using a self-aligned multiple reverse-side exposure scheme for an improved quality-factor tunable ferroelectric capacitor. The microelectrodes are fabricated on a functional substrate—a thin film ferroelectric (barium strontium titanate, BST; BaxSr1-xTiO3) coated sapphire substrate, which has an electric-field-dependent dielectric property providing tuning functionality, as well as UV transparency permitting an additional degree of freedom in photolithography steps. The microelectrode process has been applied to interdigitated capacitor fabrication, where a critical challenge is maintaining narrow gaps between electrodes for high tunability, while simultaneously forming thick electrodes to minimize conductor loss. A single mask, self-aligned reverse-side exposure through the transparent substrate achieves both these goals. A single-finger test capacitor with an electrode gap of 1.2 µm and an electrode thickness of 2.2 µm is fabricated and characterized. Tunability (T = 100 × (C0 - Cbias)/C0) of 33% at 10 V has been achieved at 100 kHz. The 2.2 µm thick structure shows improvement of Q-factor compared to that of a 0.1 µm thick structure. To demonstrate the scalability of this process, a 102-finger interdigitated capacitor is fabricated and characterized at 100 kHz and 1 GHz. The structure is embedded in a 25 µm thick epoxy resin SU-8 for passivation. A quality factor decrease of 15-25%, tunability decrease of 2-3% and capacitance increase of 6% are observed due to the expoxy resin after passivation. High frequency performance of the capacitor has been measured to be 15.9 pF of capacitance, 28.1% tunability at 10 V and a quality factor of 16 (at a 10 V dc bias) at 1 GHz.

  7. Modeling microelectrode biosensors: free-flow calibration can substantially underestimate tissue concentrations.

    Science.gov (United States)

    Newton, Adam J H; Wall, Mark J; Richardson, Magnus J E

    2017-03-01

    Microelectrode amperometric biosensors are widely used to measure concentrations of analytes in solution and tissue including acetylcholine, adenosine, glucose, and glutamate. A great deal of experimental and modeling effort has been directed at quantifying the response of the biosensors themselves; however, the influence that the macroscopic tissue environment has on biosensor response has not been subjected to the same level of scrutiny. Here we identify an important issue in the way microelectrode biosensors are calibrated that is likely to have led to underestimations of analyte tissue concentrations. Concentration in tissue is typically determined by comparing the biosensor signal to that measured in free-flow calibration conditions. In a free-flow environment the concentration of the analyte at the outer surface of the biosensor can be considered constant. However, in tissue the analyte reaches the biosensor surface by diffusion through the extracellular space. Because the enzymes in the biosensor break down the analyte, a density gradient is set up resulting in a significantly lower concentration of analyte near the biosensor surface. This effect is compounded by the diminished volume fraction (porosity) and reduction in the diffusion coefficient due to obstructions (tortuosity) in tissue. We demonstrate this effect through modeling and experimentally verify our predictions in diffusive environments. NEW & NOTEWORTHY Microelectrode biosensors are typically calibrated in a free-flow environment where the concentrations at the biosensor surface are constant. However, when in tissue, the analyte reaches the biosensor via diffusion and so analyte breakdown by the biosensor results in a concentration gradient and consequently a lower concentration around the biosensor. This effect means that naive free-flow calibration will underestimate tissue concentration. We develop mathematical models to better quantify the discrepancy between the calibration and tissue

  8. DNA-barcode directed capture and electrochemical metabolic analysis of single mammalian cells on a microelectrode array.

    Science.gov (United States)

    Douglas, Erik S; Hsiao, Sonny C; Onoe, Hiroaki; Bertozzi, Carolyn R; Francis, Matthew B; Mathies, Richard A

    2009-07-21

    A microdevice is developed for DNA-barcode directed capture of single cells on an array of pH-sensitive microelectrodes for metabolic analysis. Cells are modified with membrane-bound single-stranded DNA, and specific single-cell capture is directed by the complementary strand bound in the sensor area of the iridium oxide pH microelectrodes within a microfluidic channel. This bifunctional microelectrode array is demonstrated for the pH monitoring and differentiation of primary T cells and Jurkat T lymphoma cells. Single Jurkat cells exhibited an extracellular acidification rate of 11 milli-pH min(-1), while primary T cells exhibited only 2 milli-pH min(-1). This system can be used to capture non-adherent cells specifically and to discriminate between visually similar healthy and cancerous cells in a heterogeneous ensemble based on their altered metabolic properties.

  9. Electrohydrodynamic actuation of co-flowing liquids by means of microelectrode arrays

    International Nuclear Information System (INIS)

    Garcia-Sanchez, Pablo; Ferney, Mathieu; Ramos, Antonio

    2011-01-01

    Electric fields induce forces at the interface between liquids with different electrical properties (conductivity and/or permittivity). We explore how to use these forces for manipulating two coflowing streams of liquids in a microchannel. A microelectrode array is fabricated at the bottom of the channel and one of the two liquids is labelled with a fluorescent dye for observing the phenomenon. The diffuse interface between the two liquids is deflected depending on the ac signal and conductivity (or permittivity) ratio between the liquids. Only a few volts are needed for observing the interface destabilization, in contrast with other electrode configurations where hundreds of volts are applied.

  10. Electrohydrodynamic actuation of co-flowing liquids by means of microelectrode arrays

    Energy Technology Data Exchange (ETDEWEB)

    Garcia-Sanchez, Pablo; Ferney, Mathieu; Ramos, Antonio, E-mail: pablogarcia@us.es [Depto. de Electronica y Electromagnetismo, University of Sevilla (Spain)

    2011-06-23

    Electric fields induce forces at the interface between liquids with different electrical properties (conductivity and/or permittivity). We explore how to use these forces for manipulating two coflowing streams of liquids in a microchannel. A microelectrode array is fabricated at the bottom of the channel and one of the two liquids is labelled with a fluorescent dye for observing the phenomenon. The diffuse interface between the two liquids is deflected depending on the ac signal and conductivity (or permittivity) ratio between the liquids. Only a few volts are needed for observing the interface destabilization, in contrast with other electrode configurations where hundreds of volts are applied.

  11. Movable chain jacks and winches: case study of PETROBRAS' P58/)62and ENI's Goliat

    Energy Technology Data Exchange (ETDEWEB)

    Grindheim, Reidar [Aker Pusnes AS, Arendal (Norway)

    2012-07-01

    Recently, Aker Solutions delivered a movable chain jack system to PETROBRAS's P58/P62 FPSOs and a movable windlass system to ENI's Goliat FPSO. This paper highlights the main differences between the two systems and when it is beneficial to employ movable systems. There are many parameters to consider in determining which system to use - also a traditional system involving a single winch or chain jack per mooring line may in many cases be preferred. The movable chain jack concept is designed to operate multiple mooring lines within the same cluster. A single chain jack is lifted by a skidding gantry and moved to the next mooring line and so forth. Installation and messenger chains are moved using a large sliding chain locker allowing for later offloading of the surplus chain. The movable windlass system is also designed to operate multiple mooring lines within the same cluster. However, in this case the winch is rotary and can operate via electric or hydraulic power. One of the main considerations is to move the windlass and keep the mooring lines intact without cutting them. (author)

  12. BioMEMS for mitochondria medicine

    Science.gov (United States)

    Padmaraj, Divya

    A BioMEMS device to study cell-mitochondrial physiological functionalities was developed. The pathogenesis of many diseases including obesity, diabetes and heart failure as well as aging has been linked to functional defects of mitochondria. The synthesis of Adenosine Tri Phosphate (ATP) is determined by the electrical potential across the inner mitochondrial membrane and by the pH difference due to proton flux across it. Therefore, electrical characterization by E-fields with complementary chemical testing was used here. The BioMEMS device was fabricated as an SU-8 based microfluidic system with gold electrodes on SiO2/Si wafers for electromagnetic interrogation. Ion Sensitive Field Effect Transistors (ISFETs) were incorporated for proton studies important in the electron transport chain, together with monitoring Na+, K+ and Ca++ ions for ion channel studies. ISFETs are chemically sensitive Metal Oxide Semiconductor Field Effect Transistor (MOSFET) devices and their threshold voltage is directly proportional to the electrolytic H+ ion variation. These ISFETs (sensitivity ˜55 mV/pH for H+) were further realized as specific ion sensitive Chemical Field Effect Transistors (CHEMFETs) by depositing a specific ion sensitive membrane on the gate. Electrodes for dielectric spectroscopy studies of mitochondria were designed as 2- and 4-probe structures for optimized operation over a wide frequency range. In addition, to limit polarization effects, a 4-electrode set-up with unique meshed pickup electrodes (7.5x7.5 mum2 loops with 4 mum wires) was fabricated. Sensitivity of impedance spectroscopy to membrane potential changes was confirmed by studying the influence of uncouplers and glucose on mitochondria. An electrical model was developed for the mitochondrial sample, and its frequency response correlated with impedance spectroscopy experiments of sarcolemmal mitochondria. Using the mesh electrode structure, we obtained a reduction of 83.28% in impedance at 200 Hz. COMSOL

  13. Movable scour protection. CFD calculation of flow and scour around foundation

    Energy Technology Data Exchange (ETDEWEB)

    Miller, R.

    2002-07-01

    In the design of scour protections a basic parameter is the variation of the bed shear stress around the structure and the potential of the flow for using the stones of the scour protection. This report investigates whether it is: 1. Possible to calculate the correct bed shear stress for various wave and current situations at the base of the foundations, 2. Possible to calculate the scour depths with and without scour protection or in the case of movable scour protection. A number of test runs were made with the Elypsos computer code with the added morphological module (=sediment transport module). It turned out that it is possible to make such calculations but they are extremely time consuming on even a large computer for a simple structure like the circular foundation. It turns out that the computations overpredict the scour depth somewhat. Therefore a more practical approach was made. The morphological model was taken out. Instead the distribution of bottom shear stress distribution around the base of the structure was calculated. This is the important parameter for designing the armour layer of the scour protection. The Shields criterion was used for predicting stable stones and a suitable high value of the shear stress is used. The high bottom shear stress appears for a horizontal bottom. If the sea bottom is allowed to deepen in the areas with maximum shear stress amplification the horseshoe eddy is weakened. This again reduces the shear stress amplification. The computer program was used to perform such calculations and it turned out to be a powerful tool for this. The shear stress amplification can be reduced with a factor 2. Interactively, it is thus possible to calculate the form of a scour hole by trial and error. The scour protection surface shape with the smallest amplification of the shear stress and with the shear stress below the critical Shields Parameter is the optimum scour protection. The program can be used interactively to calculate the extent

  14. Nanogenerators for self-powering nanosystems and piezotronics for smart MEMS/NEMS

    KAUST Repository

    Wang, Zhong Lin

    2011-01-01

    Two new fields are introduced to MEMS/NEMS: a nanogenerator that harvests mechanical energy for powering nanosystems, and strained induced piezotronics for smart MEMS. Fundamentally, due to the polarization of ions in a crystal that has non

  15. Fabrication of gas sensor based on field ionization from SWCNTs with tripolar microelectrode

    International Nuclear Information System (INIS)

    Cai, Shengbing; Zhang, Yong; Duan, Zhemin

    2012-01-01

    We report the nanofabrication of a sulfur dioxide (SO 2 ) sensor with a tripolar on-chip microelectrode utilizing a film of single-walled carbon nanotubes (SWCNTs) as the field ionization cathode, where the ion flow current and the partial discharge current generated by the field ionization process of gaseous molecules can be gauged to gas species and concentration. The variation of the sensitivity is less than 4% for all of the tested devices, and the sensor has selectivity against gases such as He, NO 2 , CO, H 2 , SO 2 and O 2 . Further, the sensor response presents well-defined and reproducible linear behavior with regard to concentration in the range investigated and a detection limitation of <∼0.5 ppm for SO 2 . More importantly, a tripolar on-chip microelectrode with SWCNTs as a cathode exhibits an impressive performance with respect to stability and anti-oxidation behavior, which are significantly better than had been possible before in the traditional bipolar sensor under explicit circumstances at room temperature. (paper)

  16. Voltammetric studies on the electrochemical determination of methylmercury in chloride medium at carbon microelectrodes

    Energy Technology Data Exchange (ETDEWEB)

    Ribeiro, F. [Centro de Electroquimica e Cinetica da Universidade de Lisboa, Departamento de Quimica e Bioquimica, Faculdade de Ciencias, Universidade de Lisboa, Campo Grande, Ed. C8, 1749-016 Lisbon (Portugal); Neto, M.M.M. [Centro de Electroquimica e Cinetica da Universidade de Lisboa, Departamento de Quimica e Bioquimica, Faculdade de Ciencias, Universidade de Lisboa, Campo Grande, Ed. C8, 1749-016 Lisbon (Portugal) and Departamento de Quimica Agricola e Ambiental, Instituto Superior de Agronomia, Tapada da Ajuda, 1349-017 Lisbon (Portugal)]. E-mail: mm.neto@netcabo.pt; Rocha, M.M. [Centro de Electroquimica e Cinetica da Universidade de Lisboa, Departamento de Quimica e Bioquimica, Faculdade de Ciencias, Universidade de Lisboa, Campo Grande, Ed. C8, 1749-016 Lisbon (Portugal); Fonseca, I.T.E. [Centro de Electroquimica e Cinetica da Universidade de Lisboa, Departamento de Quimica e Bioquimica, Faculdade de Ciencias, Universidade de Lisboa, Campo Grande, Ed. C8, 1749-016 Lisbon (Portugal)

    2006-10-10

    Electroanalytical techniques have been used to determine methylmercury at low levels in environmental matrices. The electrochemical behaviour of methylmercury at carbon microelectrodes in a hydrochloric acid medium using cyclic, square wave and fast-scan linear-sweep voltammetric techniques has been investigated. The analytical utility of the methylmercury reoxidation peak has been explored, but the recorded peak currents were found to be poorly reproducible. This is ascribed to two factors: the adsorption of insoluble chloromercury compounds on the electrode surface, which appears to be an important contribution to hinder the voltammetric signal of methylmercury; and the competition between the reoxidation of the methylmercury radical and its dimerization reaction, which limits the reproducibility of the methylmercury peak. These problems were successfully overcome by adopting the appropriate experimental conditions. Fast-scan rates were employed and an efficient electrochemical regeneration procedure of the electrode surface was achieved, under potentiostatic conditions in a mercury-free solution containing potassium thiocyanate-a strong complexing agent. The influence of chloride ion concentration was analysed. Interference by metals, such as lead and cadmium, was considered. Calibration plots were obtained in the micromolar and submicromolar concentration ranges, allowing the electrochemical determination of methylmercury in trace amounts. An estuarine water sample was analysed using the new method with a glassy carbon microelectrode.

  17. Development and characterization of a voltammetric carbon-fiber microelectrode pH sensor.

    Science.gov (United States)

    Makos, Monique A; Omiatek, Donna M; Ewing, Andrew G; Heien, Michael L

    2010-06-15

    This work describes the development and characterization of a modified carbon-fiber microelectrode sensor capable of measuring real-time physiological pH changes in biological microenvironments. The reagentless sensor was fabricated under ambient conditions from voltammetric reduction of the diazonium salt Fast Blue RR onto a carbon-fiber surface in aprotic media. Fast-scan cyclic voltammetry was used to probe redox activity of the p-quinone moiety of the surface-bound molecule as a function of pH. In vitro calibration of the sensor in solutions ranging from pH 6.5 to 8.0 resulted in a pH-dependent anodic peak potential response. Flow-injection analysis was used to characterize the modified microelectrode, revealing sensitivity to acidic and basic changes discernible to 0.005 pH units. Furthermore, the modified electrode was used to measure dynamic in vivo pH changes evoked during neurotransmitter release in the central nervous system of the microanalytical model organism Drosophila melanogaster.

  18. The impact of multichannel microelectrode recording (MER) in deep brain stimulation of the basal ganglia.

    Science.gov (United States)

    Kinfe, Thomas M; Vesper, Jan

    2013-01-01

    Deep brain stimulation (DBS) of the basal ganglia (Ncl. subthalamicus, Ncl. ventralis intermedius thalami, globus pallidus internus) has become an evidence-based and well-established treatment option in otherwise refractory movement disorders. The Ncl. subthalamicus (STN) is the target of choice in Parkinson's disease.However, a considerable discussion is currently ongoing with regard to the necessity for micro-electrode recording (MER) in DBS surgery.The present review provides an overview on deep brain stimulation and (MER) of the STN in patients with Parkinson's disease. Detailed description is given concerning the multichannel MER systems nowadays available for DBS of the basal ganglia, especially of the STN, as a useful tool for target refinement. Furthermore, an overview is given of the historical aspects, spatial mapping of the STN by MER, and its impact for accuracy and precision in current functional stereotactic neurosurgery.The pros concerning target refinement by MER means on the one hand, and cons including increased bleeding risk, increased operation time, local or general anesthesia, and single versus multichannel microelectrode recording are discussed in detail. Finally, the authors favor the use of MER with intraoperative testing combined with imaging to achieve a more precise electrode placement, aiming to ameliorate clinical outcome in therapy-resistant movement disorders.

  19. Impedance Immunsensor Based on Interdigitated Array Microelectrode and its Experiment Parameter Optimization

    Directory of Open Access Journals (Sweden)

    Wen Ping Zhao

    2014-05-01

    Full Text Available This article accounts for a novel impedance immunosensor based on the specificity reaction of the antigen-antibody and the sensitivity of the interdigitated array microelectrode (IDAM for the determination of chlorpyrifos residues. The basic knowledge of immunoassay was in relation to its IDAM electrode surface modification, antibody immobilization, bovine serum albumin (BSA blocking and sample detection. The SPA was dropped onto the surface of IDAM electrode, used for binding antibody Fc fragments. Next, antibody was immobilized on the SPA modified electrode. Finally, BSA was employed to block the possible remaining active sites avoiding any nonspecific adsorption. Target chlorpyrifos was then captured by the immobilized antibody, resulting in a change in the impedance of the IDAM microelectrode surface. The fabrication procedure of the immunosensor and the sample detection were characterized by electrochemical impedance spectroscopy (EIS. The influences of the experiment parameters were investigated. Under optimized conditions, an excellent biosensor was fabricated. Many of the antibodies, enzymes and other reagents integral to immunoassays were very expensive, often hundreds of dollars per milligram, therefore miniaturization reduces reagent costs drastically. In this article the volume of the reagents was micro upgrade, the antibodies, SPA and BSA were 30 mL, the chlorpyrifos sample and detection solution were 50mL. The advantages of the immunosensor were exhibited in its better specificity, stability, selectivity and regeneration. The proposed method was proven to be a feasible quantitative method for chlorpyrifos analysis in vegetables and fruits.

  20. Microfabrication, characterization and in vivo MRI compatibility of diamond microelectrodes array for neural interfacing.

    Science.gov (United States)

    Hébert, Clément; Warnking, Jan; Depaulis, Antoine; Garçon, Laurie Amandine; Mermoux, Michel; Eon, David; Mailley, Pascal; Omnès, Franck

    2015-01-01

    Neural interfacing still requires highly stable and biocompatible materials, in particular for in vivo applications. Indeed, most of the currently used materials are degraded and/or encapsulated by the proximal tissue leading to a loss of efficiency. Here, we considered boron doped diamond microelectrodes to address this issue and we evaluated the performances of a diamond microelectrode array. We described the microfabrication process of the device and discuss its functionalities. We characterized its electrochemical performances by cyclic voltammetry and impedance spectroscopy in saline buffer and observed the typical diamond electrode electrochemical properties, wide potential window and low background current, allowing efficient electrochemical detection. The charge storage capacitance and the modulus of the electrochemical impedance were found to remain in the same range as platinum electrodes used for standard commercial devices. Finally we observed a reduced Magnetic Resonance Imaging artifact when the device was implanted on a rat cortex, suggesting that boron doped-diamond is a very promising electrode material allowing functional imaging. Copyright © 2014 Elsevier B.V. All rights reserved.

  1. Dual-side and three-dimensional microelectrode arrays fabricated from ultra-thin silicon substrates

    International Nuclear Information System (INIS)

    Du, Jiangang; Masmanidis, Sotiris C; Roukes, Michael L

    2009-01-01

    A method for fabricating planar implantable microelectrode arrays was demonstrated using a process that relied on ultra-thin silicon substrates, which ranged in thickness from 25 to 50 µm. The challenge of handling these fragile materials was met via a temporary substrate support mechanism. In order to compensate for putative electrical shielding of extracellular neuronal fields, separately addressable electrode arrays were defined on each side of the silicon device. Deep reactive ion etching was employed to create sharp implantable shafts with lengths of up to 5 mm. The devices were flip-chip bonded onto printed circuit boards (PCBs) by means of an anisotropic conductive adhesive film. This scalable assembly technique enabled three-dimensional (3D) integration through formation of stacks of multiple silicon and PCB layers. Simulations and measurements of microelectrode noise appear to suggest that low impedance surfaces, which could be formed by electrodeposition of gold or other materials, are required to ensure an optimal signal-to-noise ratio as well a low level of interchannel crosstalk

  2. Voltammetric studies on the electrochemical determination of methylmercury in chloride medium at carbon microelectrodes

    International Nuclear Information System (INIS)

    Ribeiro, F.; Neto, M.M.M.; Rocha, M.M.; Fonseca, I.T.E.

    2006-01-01

    Electroanalytical techniques have been used to determine methylmercury at low levels in environmental matrices. The electrochemical behaviour of methylmercury at carbon microelectrodes in a hydrochloric acid medium using cyclic, square wave and fast-scan linear-sweep voltammetric techniques has been investigated. The analytical utility of the methylmercury reoxidation peak has been explored, but the recorded peak currents were found to be poorly reproducible. This is ascribed to two factors: the adsorption of insoluble chloromercury compounds on the electrode surface, which appears to be an important contribution to hinder the voltammetric signal of methylmercury; and the competition between the reoxidation of the methylmercury radical and its dimerization reaction, which limits the reproducibility of the methylmercury peak. These problems were successfully overcome by adopting the appropriate experimental conditions. Fast-scan rates were employed and an efficient electrochemical regeneration procedure of the electrode surface was achieved, under potentiostatic conditions in a mercury-free solution containing potassium thiocyanate-a strong complexing agent. The influence of chloride ion concentration was analysed. Interference by metals, such as lead and cadmium, was considered. Calibration plots were obtained in the micromolar and submicromolar concentration ranges, allowing the electrochemical determination of methylmercury in trace amounts. An estuarine water sample was analysed using the new method with a glassy carbon microelectrode

  3. Smartphone MEMS accelerometers and earthquake early warning

    Science.gov (United States)

    Kong, Q.; Allen, R. M.; Schreier, L.; Kwon, Y. W.

    2015-12-01

    The low cost MEMS accelerometers in the smartphones are attracting more and more attentions from the science community due to the vast number and potential applications in various areas. We are using the accelerometers inside the smartphones to detect the earthquakes. We did shake table tests to show these accelerometers are also suitable to record large shakings caused by earthquakes. We developed an android app - MyShake, which can even distinguish earthquake movements from daily human activities from the recordings recorded by the accelerometers in personal smartphones and upload trigger information/waveform to our server for further analysis. The data from these smartphones forms a unique datasets for seismological applications, such as earthquake early warning. In this talk I will layout the method we used to recognize earthquake-like movement from single smartphone, and the overview of the whole system that harness the information from a network of smartphones for rapid earthquake detection. This type of system can be easily deployed and scaled up around the global and provides additional insights of the earthquake hazards.

  4. Nonlinear Dynamics of Electrostatically Actuated MEMS Arches

    KAUST Repository

    Al Hennawi, Qais M.

    2015-05-01

    In this thesis, we present theoretical and experimental investigation into the nonlinear statics and dynamics of clamped-clamped in-plane MEMS arches when excited by an electrostatic force. Theoretically, we first solve the equation of motion using a multi- mode Galarkin Reduced Order Model (ROM). We investigate the static response of the arch experimentally where we show several jumps due to the snap-through instability. Experimentally, a case study of in-plane silicon micromachined arch is studied and its mechanical behavior is measured using optical techniques. We develop an algorithm to extract various parameters that are needed to model the arch, such as the induced axial force, the modulus of elasticity, and the initially induced initial rise. After that, we excite the arch by a DC electrostatic force superimposed to an AC harmonic load. A softening spring behavior is observed when the excitation is close to the first resonance frequency due to the quadratic nonlinearity coming from the arch geometry and the electrostatic force. Also, a hardening spring behavior is observed when the excitation is close to the third (second symmetric) resonance frequency due to the cubic nonlinearity coming from mid-plane stretching. Then, we excite the arch by an electric load of two AC frequency components, where we report a combination resonance of the summed type. Agreement is reported among the theoretical and experimental work.

  5. MEMS based impedimetric sensing of phthalates

    KAUST Repository

    Zia, Asif I.

    2013-05-01

    Phthalate esters are known ubiquitous teratogenic and carcinogenic environmental and food pollutants. Their detection and quantification is strictly laboratory based, time consuming, expensive and professionally handled procedure. Presented research work describes a real time non-invasive detection technique for phthalates detection in ethanol, water and drinks. The new type of inter-digital sensor design incorporating multiple sensing gold electrodes were fabricated on silicon substrate based on thin film micro-electromechanical system (MEMS) using semiconductor device fabrication technology. A passivation layer of Silicon Nitride (Si3N4) was used to functionalize the sensor. Various concentrations (0.1 to 20ppm) of DINP (di-isononyl phthalates) in ethanol and di (2-ethylhexyl) phthalate (DEHP) in deionized MilliQ water were subjected to the testing system by dip testing method. Electrochemical impedance spectroscopy (EIS) technique was used to obtain impedance spectra in order to determine sample conductance for evaluation of its dielectric properties. The impedance spectra so obtained showed that the sensor was able to detect the presence of phthalates in the samples distinctively. Electrochemical Spectrum Analyser was used to model the experimentally obtained impedance spectra by curve fitting technique to figure out Constant Phase Element (CPE) equivalent circuit. Locally available energy drink and juice was added with phthalates in concentrations of 2, 6 and 10ppm to observe the performance of the sensor in such products. Experimental results showed that the new sensor was able to detect different concentrations of phthalates in energy drinks. © 2013 IEEE.

  6. MEMS Logic Using Mixed-Frequency Excitation

    KAUST Repository

    Ilyas, Saad

    2017-06-22

    We present multi-function microelectromechanical systems (MEMS) logic device that can perform the fundamental logic gate AND, OR, universal logic gates NAND, NOR, and a tristate logic gate using mixed-frequency excitation. The concept is based on exciting combination resonances due to the mixing of two or more input signals. The device vibrates at two steady states: a high state when the combination resonance is activated and a low state when no resonance is activated. These vibration states are assigned to logical value 1 or 0 to realize the logic gates. Using ac signals to drive the resonator and to execute the logic inputs unifies the input and output wave forms of the logic device, thereby opening the possibility for cascading among logic devices. We found that the energy consumption per cycle of the proposed logic resonator is higher than those of existing technologies. Hence, integration of such logic devices to build complex computational system needs to take into consideration lowering the total energy consumption. [2017-0041

  7. DMD reliability: a MEMS success story

    Science.gov (United States)

    Douglass, Michael

    2003-01-01

    The Digital Micromirror Device (DMD) developed by Texas Instruments (TI) has made tremendous progress in both performance and reliability since it was first invented in 1987. From the first working concept of a bistable mirror, the DMD is now providing high-brightness, high-contrast, and high-reliability in over 1,500,000 projectors using Digital Light Processing technology. In early 2000, TI introduced the first DMD chip with a smaller mirror (14-micron pitch versus 17-micron pitch). This allowed a greater number of high-resolution DMD chips per wafer, thus providing an increased output capacity as well as the flexibility to use existing package designs. By using existing package designs, subsequent DMDs cost less as well as met our customers' demand for faster time to market. In recent years, the DMD achieved the status of being a commercially successful MEMS device. It reached this status by the efforts of hundreds of individuals working toward a common goal over many years. Neither textbooks nor design guidelines existed at the time. There was little infrastructure in place to support such a large endeavor. The knowledge we gained through our characterization and testing was all we had available to us through the first few years of development. Reliability was only a goal in 1992 when production development activity started; a goal that many throughout the industry and even within Texas Instruments doubted the DMD could achieve. The results presented in this paper demonstrate that we succeeded by exceeding the reliability goals.

  8. Field Tests of a Portable MEMS Gravimeter

    Directory of Open Access Journals (Sweden)

    Richard P. Middlemiss

    2017-11-01

    Full Text Available Gravimeters are used to measure density anomalies under the ground. They are applied in many different fields from volcanology to oil and gas exploration, but present commercial systems are costly and massive. A new type of gravity sensor has been developed that utilises the same fabrication methods as those used to make mobile phone accelerometers. In this study, we describe the first results of a field-portable microelectromechanical system (MEMS gravimeter. The stability of the gravimeter is demonstrated through undertaking a multi-day measurement with a standard deviation of 5.58 × 10 − 6 ms − 2 . It is then demonstrated that a change in gravitational acceleration of 4.5 × 10 − 5 ms − 2 can be measured as the device is moved between the top and the bottom of a 20.7 m lift shaft with a signal-to-noise ratio (SNR of 14.25. Finally, the device is demonstrated to be stable in a more harsh environment: a 4.5 × 10 − 4 ms − 2 gravity variation is measured between the top and bottom of a 275-m hill with an SNR of 15.88. These initial field-tests are an important step towards a chip-sized gravity sensor.

  9. Modular packaging concept for MEMS and MOEMS

    Science.gov (United States)

    Stenchly, Vanessa; Reinert, Wolfgang; Quenzer, Hans-Joachim

    2017-11-01

    Wherever technical systems detect objects in their environment or interact with people, optical devices may play an important role. Light can be relatively easily produced and spatially and temporally modulated. Laser can project sharp images over long distances or cut materials in short distances. Depending on the wavelength an invisible scanning in near infrared for gesture recognition is possible as well as a projection of brilliant colour images. For several years, the Fraunhofer ISIT develops Opto-Packaging processes based on the viscous reshaping of glass wafers: First, hermetically sealed laser micro-mirror scanners WLP with inclined windows deflect in the central light reflex of the window out of the image area. Second, housing with lateral light exit permits hermetic sealing of edge-emitting lasers for highest reliability and durability. Such systems are currently experiencing an extremely high interest of the industry in all segments, from consumer to automotive through to materials processing. Our modular Opto-Packaging platform enables fast product developments. Housing for opto mechanical MEMS devices are equipped with inclined windows to minimize distortion, stray light and reflection losses. The hot viscous glass forming technology is also applied to functionalized substrate wafers which possess areas with high heat dissipation in addition to thermally insulating areas. Electrical contacts may be realized with metal filled vias or TGV (Through Glass Vias). The modular system reduces the development times for new, miniaturized optical systems so that manufacturers can focus on the essentials in their development, namely their product functionalities.

  10. Memória de longo prazo modulada pela memória de curto prazo

    Directory of Open Access Journals (Sweden)

    Viviane Moreira-Aguiar

    2008-01-01

    Full Text Available Quando um estímulo ocorre aleatoriamente à esquerda ou à direita, a resposta é mais rápida quando estímulo e resposta estão no mesmo lado (condição compatível do que em lados opostos (condição incompatível. Na tarefa de Simon, embora a resposta seja selecionada pela forma (ou cor do estímulo, a posição deste influencia o Tempo de Reação Manual (TRM. O efeito Simon corresponde à diferença entre as médias dos TRMs nas duas condições (incompatível e compatível. Neste trabalho, estudamos como uma tarefa prévia de compatibilidade realizada com um dedo indicador modula o efeito Simon. Vinte e oito voluntários realizaram uma tarefa de compatibilidade seguida pela tarefa de Simon. No grupo compatível (14 voluntários, encontramos um efeito Simon de 24 ms. No incompatível (14 voluntários, ocorreu um efeito Simon inverso de -16 ms. Estes resultados mostram uma modulação da memória de longo prazo por uma tarefa envolvendo a memória de curto prazo.

  11. Poly-SiGe for MEMS-above-CMOS sensors

    CERN Document Server

    Gonzalez Ruiz, Pilar; Witvrouw, Ann

    2014-01-01

    Polycrystalline SiGe has emerged as a promising MEMS (Microelectromechanical Systems) structural material since it provides the desired mechanical properties at lower temperatures compared to poly-Si, allowing the direct post-processing on top of CMOS. This CMOS-MEMS monolithic integration can lead to more compact MEMS with improved performance. The potential of poly-SiGe for MEMS above-aluminum-backend CMOS integration has already been demonstrated. However, aggressive interconnect scaling has led to the replacement of the traditional aluminum metallization by copper (Cu) metallization, due to its lower resistivity and improved reliability. Poly-SiGe for MEMS-above-CMOS sensors demonstrates the compatibility of poly-SiGe with post-processing above the advanced CMOS technology nodes through the successful fabrication of an integrated poly-SiGe piezoresistive pressure sensor, directly fabricated above 0.13 m Cu-backend CMOS. Furthermore, this book presents the first detailed investigation on the influence o...

  12. Development of Testing Methodologies for the Mechanical Properties of MEMS

    Science.gov (United States)

    Ekwaro-Osire, Stephen

    2003-01-01

    This effort is to investigate and design testing strategies to determine the mechanical properties of MicroElectroMechanical Systems (MEMS) as well as investigate the development of a MEMS Probabilistic Design Methodology (PDM). One item of potential interest is the design of a test for the Weibull size effect in pressure membranes. The Weibull size effect is a consequence of a stochastic strength response predicted from the Weibull distribution. Confirming that MEMS strength is controlled by the Weibull distribution will enable the development of a probabilistic design methodology for MEMS - similar to the GRC developed CARES/Life program for bulk ceramics. However, the primary area of investigation will most likely be analysis and modeling of material interfaces for strength as well as developing a strategy to handle stress singularities at sharp corners, filets, and material interfaces. This will be a continuation of the previous years work. The ultimate objective of this effort is to further develop and verify the ability of the Ceramics Analysis and Reliability Evaluation of Structures Life (CARES/Life) code to predict the time-dependent reliability of MEMS structures subjected to multiple transient loads.

  13. Ball driven type MEMS SAD for artillery fuse

    International Nuclear Information System (INIS)

    Seok, Jin Oh; Jeong, Ji-hun; Eom, Junseong; Lee, Seung S; Lee, Chun Jae; Ryu, Sung Moon; Oh, Jong Soo

    2017-01-01

    The SAD (safety and arming device) is an indispensable fuse component that ensures safe and reliable performance during the use of ammunition. Because the application of electronic devices for smart munitions is increasing, miniaturization of the SAD has become one of the key issues for next-generation artillery fuses. Based on MEMS technology, various types of miniaturized SADs have been proposed and fabricated. However, none of them have been reported to have been used in actual munitions due to their lack of high impact endurance and complicated explosive train arrangements. In this research, a new MEMS SAD using a ball driven mechanism, is successfully demonstrated based on a UV LIGA (lithography, electroplating and molding) process. Unlike other MEMS SADs, both high impact endurance and simple structure were achieved by using a ball driven mechanism. The simple structural design also simplified the fabrication process and increased the processing yield. The ball driven type MEMS SAD performed successfully under the desired safe and arming conditions of a spin test and showed fine agreement with the FEM simulation result, conducted prior to its fabrication. A field test was also performed with a grenade launcher to evaluate the SAD performance in the firing environment. All 30 of the grenade samples equipped with the proposed MEMS SAD operated successfully under the high-G setback condition. (paper)

  14. Ball driven type MEMS SAD for artillery fuse

    Science.gov (United States)

    Seok, Jin Oh; Jeong, Ji-hun; Eom, Junseong; Lee, Seung S.; Lee, Chun Jae; Ryu, Sung Moon; Oh, Jong Soo

    2017-01-01

    The SAD (safety and arming device) is an indispensable fuse component that ensures safe and reliable performance during the use of ammunition. Because the application of electronic devices for smart munitions is increasing, miniaturization of the SAD has become one of the key issues for next-generation artillery fuses. Based on MEMS technology, various types of miniaturized SADs have been proposed and fabricated. However, none of them have been reported to have been used in actual munitions due to their lack of high impact endurance and complicated explosive train arrangements. In this research, a new MEMS SAD using a ball driven mechanism, is successfully demonstrated based on a UV LIGA (lithography, electroplating and molding) process. Unlike other MEMS SADs, both high impact endurance and simple structure were achieved by using a ball driven mechanism. The simple structural design also simplified the fabrication process and increased the processing yield. The ball driven type MEMS SAD performed successfully under the desired safe and arming conditions of a spin test and showed fine agreement with the FEM simulation result, conducted prior to its fabrication. A field test was also performed with a grenade launcher to evaluate the SAD performance in the firing environment. All 30 of the grenade samples equipped with the proposed MEMS SAD operated successfully under the high-G setback condition.

  15. Research and Analysis of MEMS Switches in Different Frequency Bands

    Directory of Open Access Journals (Sweden)

    Wenchao Tian

    2018-04-01

    Full Text Available Due to their high isolation, low insertion loss, high linearity, and low power consumption, microelectromechanical systems (MEMS switches have drawn much attention from researchers in recent years. In this paper, we introduce the research status of MEMS switches in different bands and several reliability issues, such as dielectric charging, contact failure, and temperature instability. In this paper, some of the following methods to improve the performance of MEMS switches in high frequency are summarized: (1 utilizing combinations of several switches in series; (2 covering a float metal layer on the dielectric layer; (3 using dielectric layer materials with high dielectric constants and conductor materials with low resistance; (4 developing MEMS switches using T-match and π-match; (5 designing MEMS switches based on bipolar complementary metal–oxide–semiconductor (BiCMOS technology and reconfigurable MEMS’ surfaces; (6 employing thermal compensation structures, circularly symmetric structures, thermal buckle-beam actuators, molybdenum membrane, and thin-film packaging; (7 selecting Ultra-NanoCrystalline diamond or aluminum nitride dielectric materials and applying a bipolar driving voltage, stoppers, and a double-dielectric-layer structure; and (8 adopting gold alloying with carbon nanotubes (CNTs, hermetic and reliable packaging, and mN-level contact.

  16. Power Management of MEMS-Based Storage Devices for Mobile Systems

    NARCIS (Netherlands)

    Khatib, M.G.; Hartel, Pieter H.

    2008-01-01

    Because of its small form factor, high capacity, and expected low cost, MEMS-based storage is a suitable storage technology for mobile systems. MEMS-based storage devices should also be energy efficient for deployment in mobile systems. The problem is that MEMS-based storage devices are mechanical,

  17. On-Line Monitoring the Growth of E. coli or HeLa Cells Using an Annular Microelectrode Piezoelectric Biosensor

    Directory of Open Access Journals (Sweden)

    Feifei Tong

    2016-12-01

    Full Text Available Biological information is obtained from the interaction between the series detection electrode and the organism or the physical field of biological cultures in the non-mass responsive piezoelectric biosensor. Therefore, electric parameter of the electrode will affect the biosensor signal. The electric field distribution of the microelectrode used in this study was simulated using the COMSOL Multiphysics analytical tool. This process showed that the electric field spatial distribution is affected by the width of the electrode finger or the space between the electrodes. In addition, the characteristic response of the piezoelectric sensor constructed serially with an annular microelectrode was tested and applied for the continuous detection of Escherichia coli culture or HeLa cell culture. Results indicated that the piezoelectric biosensor with an annular microelectrode meets the requirements for the real-time detection of E. coli or HeLa cells in culture. Moreover, this kind of piezoelectric biosensor is more sensitive than the sensor with an interdigital microelectrode. Thus, the piezoelectric biosensor acts as an effective analysis tool for acquiring online cell or microbial culture information.

  18. Towards on-chip, in-cell recordings from cultured cardiomyocytes by arrays of gold mushroom-shaped microelectrodes

    Directory of Open Access Journals (Sweden)

    Anna eFendyur

    2012-08-01

    Full Text Available Cardiological research greatly rely on the use of cultured primary cardiomyocytes (CM. The prime methodology to assess CM network electrophysiology is based on the use of extracellular recordings by substrate-integrated planar Micro-Electrode Arrays (MEAs. Whereas this methodology permits simultaneous, long-term monitoring of the CM electrical activity, it limits the information to extracellular field potentials (FP. The alternative method of intracellular action potentials (AP recordings by sharp- or patch-microelectrodes is limited to a single cell at a time. Here, we began to merge the advantages of planar MEA and intracellular microelectrodes. To that end we cultured rat CM on micrometer size protruding gold mushroom-shaped microelectrode (gMµE arrays. Cultured CMs engulf the gMµE permitting FPs recordings from individual cells. Local electroporation of a CM converts the extracellular recording configuration to attenuated intracellular APs with shape and duration similar to those recorded intracellularly. The procedure enables to simultaneously record APs from an unlimited number of CMs. The electroporated membrane spontaneously recovers. This allows for repeated recordings from the same CM a number of times (>8 for over 10 days. The further development of CM-gMµE configuration opens up new venues for basic and applied biomedical research.

  19. Further Evaluation of DNT Hazard Screening using Neural Networks from Rat Cortical Neurons on Multi-well Microelectrode Arrays

    Science.gov (United States)

    Thousands of chemicals have not been characterized for their DNT potential. Due to the need for DNT hazard identification, efforts to develop screening assays for DNT potential is a high priority. Multi-well microelectrode arrays (MEA) measure the spontaneous activity of electr...

  20. On-Line Monitoring the Growth of E. coli or HeLa Cells Using an Annular Microelectrode Piezoelectric Biosensor.

    Science.gov (United States)

    Tong, Feifei; Lian, Yan; Han, Junliang

    2016-12-18

    Biological information is obtained from the interaction between the series detection electrode and the organism or the physical field of biological cultures in the non-mass responsive piezoelectric biosensor. Therefore, electric parameter of the electrode will affect the biosensor signal. The electric field distribution of the microelectrode used in this study was simulated using the COMSOL Multiphysics analytical tool. This process showed that the electric field spatial distribution is affected by the width of the electrode finger or the space between the electrodes. In addition, the characteristic response of the piezoelectric sensor constructed serially with an annular microelectrode was tested and applied for the continuous detection of Escherichia coli culture or HeLa cell culture. Results indicated that the piezoelectric biosensor with an annular microelectrode meets the requirements for the real-time detection of E. coli or HeLa cells in culture. Moreover, this kind of piezoelectric biosensor is more sensitive than the sensor with an interdigital microelectrode. Thus, the piezoelectric biosensor acts as an effective analysis tool for acquiring online cell or microbial culture information.

  1. Evaluation of the Neuroactivity of ToxCast Compounds Using Multi-well Microelectrode Array Recordings in Primary Cortical Neurons

    Science.gov (United States)

    Evaluation of the Neuroactivity of ToxCast Compounds Using Multi-well Microelectrode Array Recordings in Primary Cortical Neurons P Valdivia1, M Martin2, WR LeFew3, D Hall3, J Ross1, K Houck2 and TJ Shafer3 1Axion Biosystems, Atlanta GA and 2NCCT, 3ISTD, NHEERL, ORD, US EPA, RT...

  2. MEMS capacitive force sensors for cellular and flight biomechanics

    International Nuclear Information System (INIS)

    Sun Yu; Nelson, Bradley J

    2007-01-01

    Microelectromechanical systems (MEMS) are playing increasingly important roles in facilitating biological studies. They are capable of providing not only qualitative but also quantitative information on the cellular, sub-cellular and organism levels, which is instrumental to understanding the fundamental elements of biological systems. MEMS force sensors with their high bandwidth and high sensitivity combined with their small size, in particular, have found a role in this domain, because of the importance of quantifying forces and their effect on the function and morphology of many biological structures. This paper describes our research in the development of MEMS capacitive force sensors that have already demonstrated their effectiveness in the areas of cell mechanics and Drosophila flight dynamics studies. (review article)

  3. MEMS and mil/aero: technology push and market pull

    Science.gov (United States)

    Clifford, Thomas H.

    2001-04-01

    MEMS offers attractive solutions to high-density fluidics, inertial, optical, switching and other demanding military/aerospace (mil/aero) challenges. However, full acceptance must confront the realities of production-scale producibility, verifiability, testability, survivability, as well as long-term reliability. Data on these `..ilities' are crucial, and are central in funding and deployment decisions. Similarly, mil/aero users must highlight specific missions, environmental exposures, and procurement issues, as well as the quirks of its designers. These issues are particularly challenging in MEMS, because of the laws of physics and business economics, as well as the risks of deploying leading-edge technology into no-fail applications. This paper highlights mil/aero requirements, and suggests reliability/qualification protocols, to guide development effort and to reassure mil/aero users that MEMS labs are mindful of the necessary realities.

  4. Videometrics-based Detection of Vibration Linearity in MEMS Gyroscope

    Directory of Open Access Journals (Sweden)

    Yong Zhou

    2011-05-01

    Full Text Available MEMS gyroscope performs as a sort of sensor to detect angular velocity, with diverse applications in engineering including vehicle and intelligent traffic etc. A balanced vibration of driving module excited by electrostatic driving signal is the base MEMS gyroscope's performance. In order to analyze the linear property of vibration in MEMS Gyroscope, a method of computer vision measuring is applied with the help of high-speed vidicon to obtain video of linear vibration of driving module in gyroscope, under the driving voltage signal of inherent frequency and amplitude linearly increasing. By means of image processing, target identifying, and motion parameter extracting from the obtained video, vibration curve with time variation is acquired. And then, linearity of this vibration system can be analyzed by focusing on the amplitude value of vibration responding to the amplitude variation of driving voltage signal.

  5. MEMS: A new approach to micro-optics

    Energy Technology Data Exchange (ETDEWEB)

    Sniegowski, J.J.

    1997-12-31

    MicroElectroMechanical Systems (MEMS) and their fabrication technologies provide great opportunities for application to micro-optical systems (MOEMS). Implementing MOEMS technology ranges from simple, passive components to complicated, active systems. Here, an overview of polysilicon surface micromachining MEMS combined with optics is presented. Recent advancements to the technology, which may enhance its appeal for micro-optics applications are emphasized. Of all the MEMS fabrication technologies, polysilicon surface micromachining technology has the greatest basis in and leverages the most the infrastructure for silicon integrated circuit fabrication. In that respect, it provides the potential for very large volume, inexpensive production of MOEMS. This paper highlights polysilicon surface micromachining technology in regards to its capability to provide both passive and active mechanical elements with quality optical elements.

  6. Amplitude saturation of MEMS resonators explained by autoparametric resonance

    International Nuclear Information System (INIS)

    Van der Avoort, C; Bontemps, J J M; Steeneken, P G; Le Phan, K; Van Beek, J T M; Van der Hout, R; Hulshof, J; Fey, R H B

    2010-01-01

    This paper describes a phenomenon that limits the power handling of MEMS resonators. It is observed that above a certain driving level, the resonance amplitude becomes independent of the driving level. In contrast to previous studies of power handling of MEMS resonators, it is found that this amplitude saturation cannot be explained by nonlinear terms in the spring constant or electrostatic force. Instead we show that the amplitude in our experiments is limited by nonlinear terms in the equation of motion which couple the in-plane length-extensional resonance mode to one or more out-of-plane (OOP) bending modes. We present experimental evidence for the autoparametric excitation of these OOP modes using a vibrometer. The measurements are compared to a model that can be used to predict a power-handling limit for MEMS resonators

  7. Amplitude saturation of MEMS resonators explained by autoparametric resonance

    Energy Technology Data Exchange (ETDEWEB)

    Van der Avoort, C; Bontemps, J J M; Steeneken, P G; Le Phan, K; Van Beek, J T M [NXP Research, Eindhoven (Netherlands); Van der Hout, R; Hulshof, J [Department of Mathematics, VU University—Faculty of Sciences, De Boelelaan 1081a, 1081 HV Amsterdam (Netherlands); Fey, R H B, E-mail: cas.van.der.avoort@nxp.com [Department of Mechanical Engineering, Eindhoven University of Technology, PO Box 513, 5600 MB, Eindhoven (Netherlands)

    2010-10-15

    This paper describes a phenomenon that limits the power handling of MEMS resonators. It is observed that above a certain driving level, the resonance amplitude becomes independent of the driving level. In contrast to previous studies of power handling of MEMS resonators, it is found that this amplitude saturation cannot be explained by nonlinear terms in the spring constant or electrostatic force. Instead we show that the amplitude in our experiments is limited by nonlinear terms in the equation of motion which couple the in-plane length-extensional resonance mode to one or more out-of-plane (OOP) bending modes. We present experimental evidence for the autoparametric excitation of these OOP modes using a vibrometer. The measurements are compared to a model that can be used to predict a power-handling limit for MEMS resonators.

  8. Integrated Magnetic MEMS Relays: Status of the Technology

    Directory of Open Access Journals (Sweden)

    Giuseppe Schiavone

    2014-08-01

    Full Text Available The development and application of magnetic technologies employing microfabricated magnetic structures for the production of switching components has generated enormous interest in the scientific and industrial communities over the last decade. Magnetic actuation offers many benefits when compared to other schemes for microelectromechanical systems (MEMS, including the generation of forces that have higher magnitude and longer range. Magnetic actuation can be achieved using different excitation sources, which create challenges related to the integration with other technologies, such as CMOS (Complementary Metal Oxide Semiconductor, and the requirement to reduce power consumption. Novel designs and technologies are therefore sought to enable the use of magnetic switching architectures in integrated MEMS devices, without incurring excessive energy consumption. This article reviews the status of magnetic MEMS technology and presents devices recently developed by various research groups, with key focuses on integrability and effective power management, in addition to the ability to integrate the technology with other microelectronic fabrication processes.

  9. Finite element modeling of micromachined MEMS photon devices

    Science.gov (United States)

    Evans, Boyd M., III; Schonberger, D. W.; Datskos, Panos G.

    1999-09-01

    The technology of microelectronics that has evolved over the past half century is one of great power and sophistication and can now be extended to many applications (MEMS and MOEMS) other than electronics. An interesting application of MEMS quantum devices is the detection of electromagnetic radiation. The operation principle of MEMS quantum devices is based on the photoinduced stress in semiconductors, and the photon detection results from the measurement of the photoinduced bending. These devices can be described as micromechanical photon detectors. In this work, we have developed a technique for simulating electronic stresses using finite element analysis. We have used our technique to model the response of micromechanical photon devices to external stimuli and compared these results with experimental data. Material properties, geometry, and bimaterial design play an important role in the performance of micromechanical photon detectors. We have modeled these effects using finite element analysis and included the effects of bimaterial thickness coating, effective length of the device, width, and thickness.

  10. Finite Element Modeling of Micromachined MEMS Photon Devices

    International Nuclear Information System (INIS)

    Datskos, P.G.; Evans, B.M.; Schonberger, D.

    1999-01-01

    The technology of microelectronics that has evolved over the past half century is one of great power and sophistication and can now be extended to many applications (MEMS and MOEMS) other than electronics. An interesting application of MEMS quantum devices is the detection of electromagnetic radiation. The operation principle of MEMS quantum devices is based on the photoinduced stress in semiconductors, and the photon detection results from the measurement of the photoinduced bending. These devices can be described as micromechanical photon detectors. In this work, we have developed a technique for simulating electronic stresses using finite element analysis. We have used our technique to model the response of micromechanical photon devices to external stimuli and compared these results with experimental data. Material properties, geometry, and bimaterial design play an important role in the performance of micromechanical photon detectors. We have modeled these effects using finite element analysis and included the effects of bimaterial thickness coating, effective length of the device, width, and thickness

  11. Mechanical design control and implementation of a new movable intensity profile beamline monitor for the TRIUMF parity experiment 497

    Science.gov (United States)

    Ries, Thomas C.

    1995-05-01

    Two new movable beam intensity profile monitors have been installed into the TRIUMF Parity Experiment 497 Beamlines. Each unit serves two functions. Firstly, the beam median position, in a plane normal to the beam, is detected by split plate Secondary Emission Monitors. This information is used to lock the beam into the position of the movable monitor to within a few μm's via high band width ferrite core steering magnets operating in tandem in a closed loop servo feedback control system. Secondly, the beam profile and intensity is detected via a multi-wire secondary emission non-movable monitor, where the data provides high precision values regarding centroidal positions and profiles. The centroid position of the beam is statistically determined to an accuracy of ±10 μm from a data record length of 1 second. The design of each device adheres to strict standards of mechanically rigid construction. The split plate SEM accuracy and repeatability is better than 15 μm with an absolute resolution limit of 0.4 μm. Maximum travel is 2 inches in the vertical plane. Since the device is mechanically modular and both degrees of freedom are combined into a single mechanical unit, fast and easy handling is possible for maintenance in radioactive areas. The actuators are dc servo motors with tachometers driven by linear servo power amplifiers. These amplifiers are used in lieu of pulse width modulated amps to eliminate noise produced by the switching circuits. Position sensing is done by variable reluctance type absolute rotary encoders providing 16 bit resolution over the full range of travel. Positioning is done manually using a self centring potentiometer on the control panel that provides a ± velocity command signal to the power amplifiers. This configuration ensures good controllability over a very large range of positioning speeds hence making 0.4 μm incremental positioning possible, as well as, fast relocations over large relative distances. The precision movement

  12. Optical MEMS: boom, bust and beyond

    Science.gov (United States)

    Ramani, Chandra Mouli

    2005-10-01

    Optical Telecommunications bandwidth, spurred by the growth of the internet, experienced unprecedented growth in the late 1990's. The creation of new enterprises was vast and the expansion of established component, system and services companies was also breathtaking. This period of speculative growth was followed in 2001-2004 by one of the most significant market crashes in history. While $20B of venture capital was invested in optical telecom in the last 10 years, the vast majority of that has been written off in the last four. Countless start-ups inaugurated with great fanfare at the end of the 20th century were unceremoniously shut down at the start of the 21st. (1) As in all speculative bubbles, innovative technologies were born and buried. Nonetheless, new capabilities emerge from the chaos and disruption; one such example is the advent of Optical MEMS (MOEMS). Its development was vigorously pursued in both academic and corporate laboratories during the boom and, in the author's view; MOEMS constitutes a powerful and versatile tool set that is an invaluable residual of the last few years. In Telecommunications, MOEMS has proven to be the technology of choice for many optical switching and wavelength management applications. (2) Variable Optical Attenuators (VOA), Wavelength Blockers (WB), Dynamic Gain Equalizers (DGE), and most recently Wavelength Selective Switches (WSS) are being used in the numerous recent network deployments. Moreover, agile networks of the future will have MOEMS at every node. This presentation will provide an overview of the history of MOEMS in Telecommunications, discuss its byproducts and project the future of the technology.

  13. Optical MEMS: past, present and future

    Science.gov (United States)

    Ramani, Chandra Mouli

    2005-09-01

    Spurred by the growth of the internet, Optical Telecommunications bandwidth, experienced unprecedented growth during late 1990's. During this time of great economic expansion, the creation of new enterprises was vast and the expansion of established component, system and services companies was breathtaking. Unfortunately, this positive economic state was short-lived. This period was followed in 2001-2004 by one of the most significant market crashes in history. During those 10 years of economic growth, about $20B in venture capital was invested in the optical telecom industry, most of this investment was lost in recent years. Many start-up industries which experienced unprecedented growth at the end of the 20th century were lost at the start of the 21st. (1) During this time many, innovative technologies were born and buried. However, many new capabilities emerged from this period of unrest; one such example is the advent of Optical MEMS (MOEMS). Many academics and corporate laboratories pursued the development of MOEMS during the economic boom and, in the author's view; MOEMS surfaced as a powerful and versatile tool set that has proved invaluable and in the last few years during economic downturn, stood the test of time. In the Telecommunications industry, for optical switching and wavelength management applications MOEMS has proven to be the technology of choice. (2) Variable Optical Attenuators (VOA), Wavelength Blockers (WB), Dynamic Gain Equalizers (DGE), and most recently Wavelength Selective Switches (WSS) are being used in the numerous recent network deployments. Moreover, agile networks of the future will have MOEMS at every node. This presentation will provide an overview of the history of MOEMS in Telecommunications, discuss its byproducts and offer a window into the future of the technology.

  14. Graphitization in Carbon MEMS and Carbon NEMS

    Science.gov (United States)

    Sharma, Swati

    Carbon MEMS (CMEMS) and Carbon NEMS (CNEMS) are an emerging class of miniaturized devices. Due to the numerous advantages such as scalable manufacturing processes, inexpensive and readily available precursor polymer materials, tunable surface properties and biocompatibility, carbon has become a preferred material for a wide variety of future sensing applications. Single suspended carbon nanowires (CNWs) integrated on CMEMS structures fabricated by electrospinning of SU8 photoresist on photolithographially patterned SU8 followed by pyrolysis are utilized for understanding the graphitization process in micro and nano carbon materials. These monolithic CNW-CMEMS structures enable the fabrication of very high aspect ratio CNWs of predefined length. The CNWs thus fabricated display core---shell structures having a graphitic shell with a glassy carbon core. The electrical conductivity of these CNWs is increased by about 100% compared to glassy carbon as a result of enhanced graphitization. We explore various tunable fabrication and pyrolysis parameters to improve graphitization in the resulting CNWs. We also suggest gas-sensing application of the thus fabricated single suspended CNW-CMEMS devices by using the CNW as a nano-hotplate for local chemical vapor deposition. In this thesis we also report on results from an optimization study of SU8 photoresist derived carbon electrodes. These electrodes were applied to the simultaneous detection of traces of Cd(II) and Pb(II) through anodic stripping voltammetry and detection limits as low as 0.7 and 0.8 microgL-1 were achieved. To further improve upon the electrochemical behavior of the carbon electrodes we elucidate a modified pyrolysis technique featuring an ultra-fast temperature ramp for obtaining bubbled porous carbon from lithographically patterned SU8. We conclude this dissertation by suggesting the possible future works on enhancing graphitization as well as on electrochemical applications

  15. Thermoelectrical Generator for a MEMS-Fuze

    Directory of Open Access Journals (Sweden)

    A. K. Efremov

    2015-01-01

    Full Text Available The structure of modern fuzes includes micro-electromechanical systems (MEMS, which have such advanced devices as micro-accelerometers and micro-switches, being triggered at a specified level of setback. Independent power source (PS, as an inherent part of the MEMSfuze, charges an energy storage unit during the shot and triggers the fuze firing circuit when the shell encounters the target. Operating level of the control signal should be achieved within the time of remote arming, determined by the type of ammunition. The paper considers a possibility to develop PS as a thermoelectric generator (TEG with aerodynamic heating of hot junctions due to friction of the projectile body on the incoming airflow. The initial temperature is determined by the driving band cutting into the rifling and friction during the movement of projectile through the tube bore. The paper presents a technique for calculating the temperature field along the body of the projectile from the critical point, located at the top of the shell head. The solution of the equation of heat balance reveals the temporal development of the projectile body temperature. The proposed mathematical model of the TEG describes the process of converting heat into electrical output signal (thermo-EMF. An example of calculation for a specific artillery system – 57-mm anti-aircraft gun S-60 is given. Calculation of the TEG output signal was limited by the time, which is necessary to reach the top of the projectile trajectory. It is shown that at high altitude the temperature difference may drop to zero, thus cutting off the TEG output signal. Selection of capacitive storage parameters can be based on the reliability test conditions of the fuze firing circuit actuators, taking into account the partial storage discharge on the trajectory before the projectile encounters the target.

  16. MEMS and MOEMS for national security applications

    Science.gov (United States)

    Scott, Marion W.

    2003-01-01

    Major opportunities for microsystem insertion into commercial applications, such as telecommunications and medical prosthesis, are well known. Less well known are applications that ensure the security of our nation, the protection of its armed forces, and the safety of its citizens. Microsystems enable entirely new possibilities to meet National Security needs, which can be classed along three lines: anticipating security needs and threats, deterring the efficacy of identified threats, and defending against the application of these threats. In each of these areas, specific products that are enabled by MEMS and MOEMS are discussed. In the area of anticipating needs and threats, sensored microsystems designed for chem/bio/nuclear threats, and sensors for border and asset protection can significantly secure our borders, ports, and transportation systems. Key features for these applications include adaptive optics and spectroscopic capabilities. Microsystems to monitor soil and water quality can be used to secure critical infrastructure, food safety can be improved by in-situ identification of pathogens, and sensored buildings can ensure the architectural safety of our homes and workplaces. A challenge to commercializing these opportunities, and thus making them available for National Security needs, is developing predictable markets and predictable technology roadmaps. The integrated circuit manufacturing industry provides an example of predictable technology maturation and market insertion, primarily due to the existence of a "unit cell" that allows volume manufacturing. It is not clear that microsystems can follow an analogous path. The possible paths to affordable low-volume production, as well as the prospects of a microsystems unit cell, are discussed.

  17. High-throughput anisotropic plasma etching of polyimide for MEMS

    International Nuclear Information System (INIS)

    Bliznetsov, Vladimir; Manickam, Anbumalar; Ranganathan, Nagarajan; Chen, Junwei

    2011-01-01

    This note describes a new high-throughput process of polyimide etching for the fabrication of MEMS devices with an organic sacrificial layer approach. Using dual frequency superimposed capacitively coupled plasma we achieved a vertical profile of polyimide with an etching rate as high as 3.5 µm min −1 . After the fabrication of vertical structures in a polyimide material, additional steps were performed to fabricate structural elements of MEMS by deposition of a SiO 2 layer and performing release etching of polyimide. (technical note)

  18. MEMS-Electronic-Photonic Heterogeneous Integrated FMCW Ladar Source

    Science.gov (United States)

    2015-12-18

    1   1.1.   E-­‐ PHI  PHASE  2  –  MEMS  LADAR  SOURCE...4   3.2.   PROPOSED  EO-­‐PLL   ARCHITECTURE  WITH  GATED  RAMP-­‐SWITCHING... PHI  Phase  2  –  MEMS  LADAR  Source   In  Phase  2,  we  continue  the  development  of  the  FMCW  LADAR

  19. Additive direct-write microfabrication for MEMS: A review

    Science.gov (United States)

    Teh, Kwok Siong

    2017-12-01

    Direct-write additive manufacturing refers to a rich and growing repertoire of well-established fabrication techniques that builds solid objects directly from computer- generated solid models without elaborate intermediate fabrication steps. At the macroscale, direct-write techniques such as stereolithography, selective laser sintering, fused deposition modeling ink-jet printing, and laminated object manufacturing have significantly reduced concept-to-product lead time, enabled complex geometries, and importantly, has led to the renaissance in fabrication known as the maker movement. The technological premises of all direct-write additive manufacturing are identical—converting computer generated three-dimensional models into layers of two-dimensional planes or slices, which are then reconstructed sequentially into threedimensional solid objects in a layer-by-layer format. The key differences between the various additive manufacturing techniques are the means of creating the finished layers and the ancillary processes that accompany them. While still at its infancy, direct-write additive manufacturing techniques at the microscale have the potential to significantly lower the barrier-of-entry—in terms of cost, time and training—for the prototyping and fabrication of MEMS parts that have larger dimensions, high aspect ratios, and complex shapes. In recent years, significant advancements in materials chemistry, laser technology, heat and fluid modeling, and control systems have enabled additive manufacturing to achieve higher resolutions at the micrometer and nanometer length scales to be a viable technology for MEMS fabrication. Compared to traditional MEMS processes that rely heavily on expensive equipment and time-consuming steps, direct-write additive manufacturing techniques allow for rapid design-to-prototype realization by limiting or circumventing the need for cleanrooms, photolithography and extensive training. With current direct-write additive

  20. RF MEMS Fractal Capacitors With High Self-Resonant Frequencies

    KAUST Repository

    Elshurafa, Amro M.

    2012-07-23

    This letter demonstrates RF microelectromechanical systems (MEMS) fractal capacitors possessing the highest reported self-resonant frequencies (SRFs) in PolyMUMPS to date. Explicitly, measurement results show SRFs beyond 20 GHz. Furthermore, quality factors higher than 4 throughout a band of 1-15 GHz and reaching as high as 28 were achieved. Additional benefits that are readily attainable from implementing fractal capacitors in MEMS are discussed, including suppressing residual stress warping, eliminating the need for etching holes, and reducing parasitics. The latter benefits were acquired without any fabrication intervention. © 2011 IEEE.

  1. An Evolutionary Approach for Robust Layout Synthesis of MEMS

    DEFF Research Database (Denmark)

    Fan, Zhun; Wang, Jiachuan; Goodman, Erik

    2005-01-01

    The paper introduces a robust design method for layout synthesis of MEM resonators subject to inherent geometric uncertainties such as the fabrication error on the sidewall of the structure. The robust design problem is formulated as a multi-objective constrained optimisation problem after certain...... assumptions and treated with multiobjective genetic algorithm (MOGA), a special type of evolutionary computing approaches. Case study based on layout synthesis of a comb-driven MEM resonator shows that the approach proposed in this paper can lead to design results that meet the target performance and are less...

  2. Endovascular retrieval of a CardioMEMS heart failure system

    Directory of Open Access Journals (Sweden)

    Arun Reghunathan, MD

    2018-04-01

    Full Text Available As the creation and utilization of new implantable devices increases, so does the need for interventionalists to devise unique retrieval mechanisms. This report describes the first endovascular retrieval of a CardioMEMS heart failure monitoring device. A 20-mm gooseneck snare was utilized in conjunction with a 9-French sheath and Envoy catheter for retrieval. The patient suffered no immediate postprocedural complications but died 5 days after the procedure from multiorgan failure secondary to sepsis. Keywords: CardioMEMS heart failure system, Endovascular retrieval

  3. Thermal energy harvesting for application at MEMS scale

    CERN Document Server

    Percy, Steven; McGarry, Scott; Post, Alex; Moore, Tim; Cavanagh, Kate

    2014-01-01

    This book discusses the history of thermal heat generators and focuses on the potential for these processes using micro-electrical mechanical systems (MEMS) technology for this application. The main focus is on the capture of waste thermal energy for example from industrial processes, transport systems or the human body to generate useable electrical power.  A wide range of technologies is discussed, including external combustion heat cycles at MEMS ( Brayton, Stirling and Rankine), Thermoacoustic, Shape Memory Alloys (SMAs), Multiferroics, Thermionics, Pyroelectric, Seebeck, Alkali Metal Thermal, Hydride Heat Engine, Johnson Thermo Electrochemical Converters, and the Johnson Electric Heat Pipe.

  4. Sputtered highly oriented PZT thin films for MEMS applications

    Science.gov (United States)

    Kalpat, Sriram S.

    Recently there has been an explosion of interest in the field of micro-electro-mechanical systems (MEMS). MEMS device technology has become critical in the growth of various fields like medical, automotive, chemical, and space technology. Among the many applications of ferroelectric thin films in MEMS devices, microfluidics is a field that has drawn considerable amount of research from bio-technology industries as well as chemical and semiconductor manufacturing industries. PZT thin films have been identified as best suited materials for micro-actuators and micro-sensors used in MEMS devices. A promising application for piezoelectric thin film based MEMS devices is disposable drug delivery systems that are capable of sensing biological parameters, mixing and delivering minute and precise amounts of drugs using micro-pumps or micro mixers. These devices call for low driving voltages, so that they can be battery operated. Improving the performance of the actuator material is critical in achieving battery operated disposal drug delivery systems. The device geometry and power consumption in MEMS devices largely depends upon the piezoelectric constant of the films, since they are most commonly used to convert electrical energy into a mechanical response of a membrane or cantilever and vice versa. Phenomenological calculation on the crystal orientation dependence of piezoelectric coefficients for PZT single crystal have reported a significant enhancement of the piezoelectric d33 constant by more than 3 times along [001] in the rhombohedral phase as compared to the conventionally used orientation PZT(111) since [111] is the along the spontaneous polarization direction. This could mean considerable improvement in the MEMS device performance and help drive the operating voltages lower. The motivation of this study is to investigate the crystal orientation dependence of both dielectric and piezoelectric coefficients of PZT thin films in order to select the appropriate

  5. SU-8 Based MEMS Process with Two Metal Layers using α-Si as a Sacrificial Material

    KAUST Repository

    Ramadan, Khaled S.

    2012-01-01

    MEMS applications. α-Si can be deposited at large thicknesses for MEMS applications and also can be released in a dry method using XeF2 which can solve stiction problems related to MEMS applications. In this thesis, an SU-8 MEMS process is developed

  6. Quantitative Analysis of Rat Dorsal Root Ganglion Neurons Cultured on Microelectrode Arrays Based on Fluorescence Microscopy Image Processing.

    Science.gov (United States)

    Mari, João Fernando; Saito, José Hiroki; Neves, Amanda Ferreira; Lotufo, Celina Monteiro da Cruz; Destro-Filho, João-Batista; Nicoletti, Maria do Carmo

    2015-12-01

    Microelectrode Arrays (MEA) are devices for long term electrophysiological recording of extracellular spontaneous or evocated activities on in vitro neuron culture. This work proposes and develops a framework for quantitative and morphological analysis of neuron cultures on MEAs, by processing their corresponding images, acquired by fluorescence microscopy. The neurons are segmented from the fluorescence channel images using a combination of segmentation by thresholding, watershed transform, and object classification. The positioning of microelectrodes is obtained from the transmitted light channel images using the circular Hough transform. The proposed method was applied to images of dissociated culture of rat dorsal root ganglion (DRG) neuronal cells. The morphological and topological quantitative analysis carried out produced information regarding the state of culture, such as population count, neuron-to-neuron and neuron-to-microelectrode distances, soma morphologies, neuron sizes, neuron and microelectrode spatial distributions. Most of the analysis of microscopy images taken from neuronal cultures on MEA only consider simple qualitative analysis. Also, the proposed framework aims to standardize the image processing and to compute quantitative useful measures for integrated image-signal studies and further computational simulations. As results show, the implemented microelectrode identification method is robust and so are the implemented neuron segmentation and classification one (with a correct segmentation rate up to 84%). The quantitative information retrieved by the method is highly relevant to assist the integrated signal-image study of recorded electrophysiological signals as well as the physical aspects of the neuron culture on MEA. Although the experiments deal with DRG cell images, cortical and hippocampal cell images could also be processed with small adjustments in the image processing parameter estimation.

  7. Age determination of the world’s oldest movable metal types through measuring the “meog” using AMS

    International Nuclear Information System (INIS)

    Hong, W.; Lee, S.C.; Park, J.H.; Park, G.; Sung, K.H.; Lee, J.G.; Nam, K.H.

    2015-01-01

    The fabrication year of a set of movable metal types that were thought to be used for printing “Jeungdoga” was investigated. Since the types were made from bronze and did not contain carbon, an organic black ink called “meog” was collected from the type surfaces to quantify their ages. The meog samples were collected from 34 metal types, and 27 ages were obtained. The youngest age was 798 ± 44 yrBP, and the oldest reasonable age was 1166 ± 43 yrBP. The weighted average after eliminating ages with poor statistics was 950 ± 28 yrBP. This age is 300 years older than that of the Jikji (AD 1377), which is a Buddhist document recognized as the world’s oldest document printed using metal types, and also older than that of the Gutenberg bible (AD 1450).

  8. Age determination of the world’s oldest movable metal types through measuring the “meog” using AMS

    Energy Technology Data Exchange (ETDEWEB)

    Hong, W., E-mail: whong@kigam.re.kr [Geochemical Analysis Center, Korea Institute of Geoscience and Mineral Resources (KIGAM), 124 Gwahang-no, Yuseong-gu, Daejeon 305-350 (Korea, Republic of); Department of Accelerator and Beam Nano Engineering, University of Science and Technology (UST), 217 Gajeong-ro, Yuseong-gu, Daejeon 305-333 (Korea, Republic of); Lee, S.C. [Cheongju Early Printing Museum, 866 Uncheon-dong, Hongdeok-gu, Cheongju, Chungbuk (Korea, Republic of); Park, J.H.; Park, G. [Geochemical Analysis Center, Korea Institute of Geoscience and Mineral Resources (KIGAM), 124 Gwahang-no, Yuseong-gu, Daejeon 305-350 (Korea, Republic of); Sung, K.H. [Geochemical Analysis Center, Korea Institute of Geoscience and Mineral Resources (KIGAM), 124 Gwahang-no, Yuseong-gu, Daejeon 305-350 (Korea, Republic of); Department of Accelerator and Beam Nano Engineering, University of Science and Technology (UST), 217 Gajeong-ro, Yuseong-gu, Daejeon 305-333 (Korea, Republic of); Lee, J.G. [Geochemical Analysis Center, Korea Institute of Geoscience and Mineral Resources (KIGAM), 124 Gwahang-no, Yuseong-gu, Daejeon 305-350 (Korea, Republic of); Nam, K.H. [Department of Library and Information Science, Kyungpook National University, 67 Kyungdaejungmun-no, Buk-gu, Daegu 702-701 (Korea, Republic of)

    2015-10-15

    The fabrication year of a set of movable metal types that were thought to be used for printing “Jeungdoga” was investigated. Since the types were made from bronze and did not contain carbon, an organic black ink called “meog” was collected from the type surfaces to quantify their ages. The meog samples were collected from 34 metal types, and 27 ages were obtained. The youngest age was 798 ± 44 yrBP, and the oldest reasonable age was 1166 ± 43 yrBP. The weighted average after eliminating ages with poor statistics was 950 ± 28 yrBP. This age is 300 years older than that of the Jikji (AD 1377), which is a Buddhist document recognized as the world’s oldest document printed using metal types, and also older than that of the Gutenberg bible (AD 1450).

  9. Design and construction of the movable limiters for holding the plasma in position in the nuclear fusion experiment TEXTOR

    International Nuclear Information System (INIS)

    Butzek, D.A.; Derichs, K.

    1983-11-01

    The nuclear fusion experiment TEXTOR (Tokamak Experiment for Technology Oriented Research) has been constructed for investigation of plasma-wall-interaction. The plasma is generated inside a torus-shaped vacuum vessel. In addition to the magnetic fields mechanical limiters are provided to hold the plasma in position. The limiter scheme of textor consists of main limiters and reference limiters (measuring limiters). Main and reference limiters are mounted in different cross sections of the torus. The main limiters are movable during the plasma discharge while the reference limiters are kept fixed. They are adjustable. Thus, by moving the main limiters, the reference limiters can be exposed to different thermal loads during the discharge. Exposing the reference limiters to the plasma, first results have been obtained concerning the scrape off layer: thickness, fluxes of hydrogen and chromium through this layer. The limiter scheme, the final design and construction of the limiters and the first phase of operation are described in this report. (orig.) [de

  10. Novel method for the preparation of core-shell nanoparticles with movable Ag core and polystyrene loop shell

    International Nuclear Information System (INIS)

    Liu Weijun; Zhang Zhicheng; He Weidong; Zheng Cheng; Ge Xuewu; Li, Jian; Liu Huarong; Jiang Hao

    2006-01-01

    Core/shell nanoparticles with movable silver (Ag) core and polystyrene (PSt) shell (Ag at PSt nanoparticle) were successfully synthesized at room temperature and under ambient pressure via two steps: γ-irradiation and interfacial-initiated polymerization. Firstly, mono-dispersed Ag nanoparticles with diameters 20 nm were synthesized in inversed microemulsion by reducing silver nitrate under γ-irradiation. Then, Ag nanoparticles were coated with PSt via interfacial-initiated polymerization with cumene hydroperoxide/ferrous sulfate/disodium ethylenediaminetetraacetate/sodium formaldehyde sulfoxylate (CHPO-Fe 2+ -EDTA-SFS) as the redox initiation pair. The resulted Ag at PSt nanoparticles were identified by transmission electron microscopy (TEM), dynamic light scattering (DLS), X-ray powder diffraction (XRD) and X-ray photoelectron spectroscopy (XPS)

  11. A novel prototyping method for die-level monolithic integration of MEMS above-IC

    International Nuclear Information System (INIS)

    Cicek, Paul-Vahe; Zhang, Qing; Saha, Tanmoy; Mahdavi, Sareh; Allidina, Karim; Gamal, Mourad El; Nabki, Frederic

    2013-01-01

    This work presents a convenient and versatile prototyping method for integrating surface-micromachined microelectromechanical systems (MEMS) directly above IC electronics, at the die level. Such localized implementation helps reduce development costs associated with the acquisition of full-sized semiconductor wafers. To demonstrate the validity of this method, variants of an IC-compatible surface-micromachining MEMS process are used to build different MEMS devices above a commercial transimpedance amplifier chip. Subsequent functional assessments for both the electronics and the MEMS indicate that the integration is successful, validating the prototyping methodology presented in this work, as well as the suitability of the selected MEMS technology for above-IC integration. (paper)

  12. Design, fabrication, and characterization of polymeric bioMEMS for the detection of feline immunodeficiency virus (FIV)

    Science.gov (United States)

    Cohen, Brian; Gadre, Anand; Kaloyeros, Alain E.

    2007-02-01

    This project comprises the development of a novel polymeric BioMEMS device capable of rapidly detecting FIV in a minimally invasive manner. FIV severely inhibits the infected feline from mounting an immune response, and causes susceptibility to other types of diseases. Vaccines against FIV do exist, but have some strong limitations to their effectiveness; so early detection is the best method to combat the spread of the disease. Current testing methods look for antibodies to the FIV protein p24 in feline blood using established Enzyme Linked ImmunoSorbent Assay (ELISA) protocols. The focus of this research is to design and construct a device that can detect antibodies to p24 in a salivary sample by non-intrusive electrochemical means. The device is constructed upon a silicon substrate with gold microelectrodes coated with polypyrrole (PPy), an electrically conducting and biocompatible polymer. In the current phase of the research, the PPy deposition process has been optimized with regards to film thickness, uniformity and conductivity. Microfluidic channels have been fabricated using SU-8, an epoxy based polymer that enables the test sample and other solutions to pass freely through the device. The PPy will be coated with anti-FIV p24 antibodies that can capture FIV p24 antigens present in a salivary sample. Future research will involve the analysis of PPy/antibody interaction and its effect on functionality. The capture of such antigens will interfere with a reduction-oxidation (redox) reaction in a subsequently added ionic solution. This interference will change the characteristic resistance of the solution yielding a qualitative test for the presence of the viral antigens in the sample and hence determining the occurrence of infection.

  13. Eco toxicological assessment of the usage of chemical meliorants and fertilizers on the content of movable fluorine in humus shallow solonetz of the Northern Kazakhstan

    International Nuclear Information System (INIS)

    Sarsenova, A.A.; Ermokhin, Yu.I.; Kazantsev, N.Ya.

    2008-01-01

    The aim of present research is the assessment of the ecological rate setting of chemical meliorants and fertilizers using for melioration of solonetz. The scientific problem of work is the study of influence of chemical meliorants, phosphogypsum doses and nitrogen fertilizer on the content of movable fluorine in soil.

  14. The movable polarized target as a basic equipment for high energy spin physics experiments at the JINR-Dubna accelerator complex

    Energy Technology Data Exchange (ETDEWEB)

    Lehar, F.; Adiasevich, B.; Androsov, V.P.; Angelov, N.; Anischenko, N.; Antonenko, V.; Ball, J.; Baryshevsky, V.G.; Bazhanov, N.A.; Belyaev, A.A.; Benda, B.; Bodyagin, V.; Borisov, N.; Borzunov, Yu.; Bradamante, F.; Bunyatova, E.; Burinov, V.; Chernykh, E.; Combet, M.; Datskov, A.; Durand, G.; Dzyubak, A.P.; Fontaine, J.M.; Get`man, V.A.; Giorgi, M.; Golovanov, L.; Grebenyuk, V.; Grosnick, D.; Gurevich, G.; Hasegawa, T.; Hill, D.; Horikawa, N.; Igo, G.; Janout, Z.; Kalinnikov, V.A.; Karnaukhov, I.M.; Kasprzyk, T.; Khachaturov, B.A.; Kirillov, A.; Kisselev, Yu.; Kousmine, E.S.; Kovalenko, A.; Kovaljov, A.I.; Ladygin, V.P.; Lazarev, A.; Leconte, P.; Lesquen, A. de; Lukhanin, A.A.; Mango, S.; Martin, A.; Matafonov, V.N.; Matyushevsky, E.; Mironov, S.; Neganov, A.B.; Neganov, B.S.; Nomofilov, A.; Perelygin, V.; Plis, Yu.; Pilipenko, Yu.; Pisarev, I.L.; Piskunov, N.; Polunin, Yu.; Popkov, Yu.P.; Propov, A.A.; Prokofiev, A.N.; Rekalo, M.P.; Rukoyatkin, P.; Sans, J.L.; Sapozhnikov, M.G.; Sharov, V.; Shilov, S.; Shishov, Yu.; Sitnik, I.M.; Sorokin, P.V.; Spinka, H.; Sporov, E.A.; Strunov, L.N.; Svetov, A.; De Swart, J.J.; Telegin, Yu.P.; Tolmashov, I.; Trentalange, S.; Tsvinev, A.; Usov, Yu.A.; Vikhrov, V.V.; Whitten, C.A.; Zaporozhets, S.; Zarubin, A.; Zhdanov, A.A.; Zolin, L. [CEA Centre d`Etudes Nucleaires de Saclay, 91 - Gif-sur-Yvette (France). Dept. d`Astrophysique, de Physique des Particules, de Physique Nucleaire et de l`Instrumentation Associee]|[I.V. Kurchatov Inst. of Atomic Energy, Moscow (Russian Federation)]|[Kharkov Inst. of Physics and Technology (Russian Federation)]|[Lab. of Nuclear Problems, JINR, Dubna (Russian Federation)]|[Lab. of High Energy Physics, JINR, Dubna (Russian Federation)]|[Lab. National SATURNE, CNRS, 91 - Gif-sur-Yvette (France)]|[Inst. of Physics, Belarus Academy of Sciences, Minsk (Belarus)]|[Dept. of Physics, Petersburg Nuclear Physics Inst., Gatchina (Russian Federation)

    1995-03-01

    A movable polarized proton target is planned to be installed in polarized beams of the Synchrophasotron-Nuclotron complex in order to carry out a spin physics experimental program at Dubna. The project is described and the first proposed experiments are discussed. ((orig.))

  15. The movable polarized target as a basic equipment for high energy spin physics experiments at the JINR-Dubna accelerator complex

    International Nuclear Information System (INIS)

    Lehar, F.; Adiasevich, B.; Androsov, V.P.; Angelov, N.; Anischenko, N.; Antonenko, V.; Ball, J.; Baryshevsky, V.G.; Bazhanov, N.A.; Belyaev, A.A.; Benda, B.; Bodyagin, V.; Borisov, N.; Borzunov, Yu.; Bradamante, F.; Bunyatova, E.; Burinov, V.; Chernykh, E.; Combet, M.; Datskov, A.; Durand, G.; Dzyubak, A.P.; Fontaine, J.M.; Get'man, V.A.; Giorgi, M.; Golovanov, L.; Grebenyuk, V.; Grosnick, D.; Gurevich, G.; Hasegawa, T.; Hill, D.; Horikawa, N.; Igo, G.; Janout, Z.; Kalinnikov, V.A.; Karnaukhov, I.M.; Kasprzyk, T.; Khachaturov, B.A.; Kirillov, A.; Kisselev, Yu.; Kousmine, E.S.; Kovalenko, A.; Kovaljov, A.I.; Ladygin, V.P.; Lazarev, A.; Leconte, P.; Lesquen, A. de; Lukhanin, A.A.; Mango, S.; Martin, A.; Matafonov, V.N.; Matyushevsky, E.; Mironov, S.; Neganov, A.B.; Neganov, B.S.; Nomofilov, A.; Perelygin, V.; Plis, Yu.; Pilipenko, Yu.; Pisarev, I.L.; Piskunov, N.; Polunin, Yu.; Popkov, Yu.P.; Propov, A.A.; Prokofiev, A.N.; Rekalo, M.P.; Rukoyatkin, P.; Sans, J.L.; Sapozhnikov, M.G.; Sharov, V.; Shilov, S.; Shishov, Yu.; Sitnik, I.M.; Sorokin, P.V.; Spinka, H.; Sporov, E.A.; Strunov, L.N.; Svetov, A.; De Swart, J.J.; Telegin, Yu.P.; Tolmashov, I.; Trentalange, S.; Tsvinev, A.; Usov, Yu.A.; Vikhrov, V.V.; Whitten, C.A.; Zaporozhets, S.; Zarubin, A.; Zhdanov, A.A.; Zolin, L.

    1995-01-01

    A movable polarized proton target is planned to be installed in polarized beams of the Synchrophasotron-Nuclotron complex in order to carry out a spin physics experimental program at Dubna. The project is described and the first proposed experiments are discussed. ((orig.))

  16. Publicity in secured transactions law: Towards a European public notice filing system for non-possessory security rights in movable assets?

    NARCIS (Netherlands)

    Hamwijk, D.J.Y.

    2014-01-01

    There is a growing call to introduce a European public notice filing system for security rights in movable goods comparable to the notice filing system of Art. 9 UCC. A proposal to this effect has been adopted in Book IX DCFR, which represents a comprehensive framework of rules for proprietary

  17. Note: Microelectrode-shielding tip for scanning probe electron energy spectroscopy

    Science.gov (United States)

    Huang, Wei; Li, Zhean; Xu, Chunkai; Liu, Jian; Xu, Chunye; Chen, Xiangjun

    2018-04-01

    We report a novel microelectrode-shielding tip (ME tip) for scanning probe electron energy spectroscopy (SPEES). The shielding effect of this tip is studied through comparing the detection efficiency with the normal tip by both experiment and simulation. The results show that the backscattering count rate detected by the SPEES instrument using the normal tip begins to decrease as the tip approaches to the sample surface within 21 μm, while that using the ME tip only starts to drop off within 1 μm. This indicates that the electron energy spectra can be measured with the ME tip at a much closer tip-sample distance. Furthermore, it is also demonstrated that the ME tip can be used to obtain topography of the sample surface in situ simultaneously.

  18. Microelectrode generator-collector systems for electrolytic titration: theoretical and practical considerations.

    Science.gov (United States)

    Bell, Christopher G; Seelanan, Parinya; O'Hare, Danny

    2017-10-23

    Electochemical generator-collector systems, where one electrode is used to generate a reagent, have a potentially large field of application in sensing and measurement. We present a new theoretical description for coplanar microelectrode disc-disc systems where the collector is passive (such as a potentiometric sensor) and the generator is operating at constant flux. This solution is then used to develop a leading order solution for such a system where the reagent reacts reversibly in solution, such as in acid-base titration, where a hydrogen ion flux is generated by electrolysis of water. The principal novel result of the theory is that such devices are constrained by a maximum reagent flux. The hydrogen ion concentration at the collector will only reflect the buffer capacity of the bulk solution if this constraint is met. Both mathematical solutions are evaluated with several microfabricated devices and reasonable agreement with theory is demonstrated.

  19. Characterization of poly(3,4-ethylenedioxythiophene):tosylate conductive polymer microelectrodes for transmitter detection

    DEFF Research Database (Denmark)

    Larsen, Simon T.; Vreeland, Richard F.; Heien, Michael L.

    2012-01-01

    applications such as capillary electrophoresis, high-performance liquid chromatography, and constant potential amperometry at living cells. Band electrodes with widths down to 3 μm were fabricated on polymer substrates using UV lithographic methods. The electrodes are electrochemically stable in a range......In this paper we investigate the physical and electrochemical properties of micropatterned poly(3,4-ethylenedioxythiophene):tosylate (PEDOT:tosylate) microelectrodes for neurochemical detection. PEDOT:tosylate is a promising conductive polymer electrode material for chip-based bioanalytical...... between −200 mV and 700 mV vs. Ag/AgCl and show a relatively low resistance. A wide range of transmitters is shown to oxidize readily on the electrodes. Kinetic rate constants and half wave potentials are reported. The capacitance per area was found to be high (1670 ± 130 μF cm−2) compared to other thin...

  20. Microelectrode-assisted low-voltage atmospheric pressure glow discharge in air

    Science.gov (United States)

    Liu, Wenzheng; Zhao, Shuai; Niu, Jiangqi; Chai, Maolin

    2017-09-01

    During the process of discharge, appropriately changing the paths corresponding to electric field lines and the field strength distribution along these paths, as well as increasing the number of initial electrons, can effectively enhance the uniformity of discharge and inhibit the formation of filamentary discharge. A method is proposed that uses a microelectrode to initiate the macroscopic discharge phenomenon. An asymmetric structure was designed comprising a single electrode of carbon fiber; this electrode structure is of helical-contact type. Benefitting from the special electric field distribution and the microdischarge process, a three-dimensional atmospheric pressure glow discharge was achieved in air, characterized by low discharge voltage, low energy consumption, good diffusion performance, and less ozone generation. The plasma studied is uniform and stable with good diffusion characteristics and low levels of contaminants and hence has potential applications in the field of air purification.

  1. Doped Overoxidized Polypyrrole Microelectrodes as Sensors for the Detection of Dopamine Released from Cell Populations

    DEFF Research Database (Denmark)

    Sasso, Luigi; Heiskanen, Arto; Diazzi, Francesco

    2013-01-01

    A surface modification of interdigitated gold microelectrodes (IDEs) with a doped polypyrrole (PPy) film for detection of dopamine released from populations of differentiated PC12 cells is presented. A thin PPy layer was potentiostatically electropolymerized from an 10 aqueous pyrrole solution onto...... electrode surfaces. The conducting polymer film was doped during electropolymerization by introducing counter ions in the monomer solution. Several counter ions were tested and the resulting electrode modifications were characterized electrochemically to find the optimal dopant that increases sensitivity...... to amperometrically detect dopamine released by populations of cells upon triggering cellular exocytosis with an elevated K+ concentration. A comparison between the generated current on bare gold electrodes and gold electrodes modified with overoxidized doped PPy illustrates the clear advantage of the modification...

  2. Hydrogen Peroxide Impedimetric Detection on Poly-Ortho-Phenylenediamine Modified Platinum Disk Microelectrode

    International Nuclear Information System (INIS)

    Zainiharyati Mohd Zain; Norazreen Zakaria

    2014-01-01

    This work describes the development of hydrogen peroxide detection based on Poly-ortho-phenylenediamine modified Platinum disk microelectrode (50 μm in diameter). The electrochemical performances of H 2 O 2 detection were studied using Chronoamperometry, Cyclic Voltammetry (CV) and Electrochemical Impedance Spectroscopy (EIS) techniques in Phosphate Buffer Solution (PBS) pH 7.4. Effect of potential, electrode size, and various concentrations of H 2 O 2 , among others, were investigated by tracking the impedance changes at a specific perturbation frequency. To obtain the Charge transfer resistance (R ct ) values, a modified Randles Equivalent Circuit was modelled and fitted to Nyquist Plot. Then, this sensor was further applied in the detection of H 2 O 2 in antiseptic mouthwash with percent recovery of 97 % ± 0.14 (x10 3 kΩ). (author)

  3. A Multimodal, SU-8 - Platinum - Polyimide Microelectrode Array for Chronic In Vivo Neurophysiology.

    Directory of Open Access Journals (Sweden)

    Gergely Márton

    Full Text Available Utilization of polymers as insulator and bulk materials of microelectrode arrays (MEAs makes the realization of flexible, biocompatible sensors possible, which are suitable for various neurophysiological experiments such as in vivo detection of local field potential changes on the surface of the neocortex or unit activities within the brain tissue. In this paper the microfabrication of a novel, all-flexible, polymer-based MEA is presented. The device consists of a three dimensional sensor configuration with an implantable depth electrode array and brain surface electrodes, allowing the recording of electrocorticographic (ECoG signals with laminar ones, simultaneously. In vivo recordings were performed in anesthetized rat brain to test the functionality of the device under both acute and chronic conditions. The ECoG electrodes recorded slow-wave thalamocortical oscillations, while the implanted component provided high quality depth recordings. The implants remained viable for detecting action potentials of individual neurons for at least 15 weeks.

  4. Microelectrode Arrays and the Use of PEG-Functionalized Diblock Copolymer Coatings

    Directory of Open Access Journals (Sweden)

    Sakshi Uppal

    2014-09-01

    Full Text Available PEG-modified diblock copolymer surfaces have been examined for their compatibility with microelectrode array based analytical methods. The use of PEG-modified polymer surfaces on the arrays was initially problematic because the redox couples used in the experiments were adsorbed by the polymer. This led the current measured by cyclic voltammetry for the redox couple to be unstable and increase with time. However, two key findings allow the experiments to be successful. First, after multiple cyclic voltammograms the current associated with the redox couple does stabilize so that a good baseline current can be established. Second, the rate at which the current stabilizes is consistent every time a particular coated array is used. Hence, multiple analytical experiments can be conducted on an array coated with a PEG-modified diblock copolymer and the data obtained is comparable as long as the data for each experiment is collected at a consistent time point.

  5. Purification of carbon nanotubes through an electric field near the arranged microelectrodes

    International Nuclear Information System (INIS)

    Shim, Hyung Cheoul; Lee, Hyung Woo; Yeom, Sujin; Kwak, Yoon Keun; Lee, Seung S; Kim, Soo Hyun

    2007-01-01

    In this work, we attempt to purify multi-walled carbon nanotubes (MWNTs) using electrophoresis induced by the application of an AC electric field to a set of microelectrodes in a microliquid channel. This purifying method is different from conventional methods based on chemical processes. It was observed that most of the MWNTs could pass along the microliquid channel without attaching to the electrode under specific conditions of 1 kHz, at 0.2 V rms μm -1 . On the other hand, the majority of the carbon impurities attached to the electrodes under identical conditions. Field emission scanning electron microscopy (FESEM) images and Raman spectra confirm that this condition is beneficial for removing carbon impurities. The proposed approach has potential applicability in the development of microdevices that can simultaneously perform the purification and fabrication of MWNTs

  6. Addressing of LnCaP Cell Using Magnetic Particles Assisted Impedimetric Microelectrode.

    Science.gov (United States)

    Nguyen, Dung Thi Xuan; Tran, Trong Binh; Nguyen, Phuong-Diem; Min, Junhong

    2016-03-01

    In this study, we provide a facile, effective technique for a simple isolation and enrichment of low metastatic prostate tumor cell LNCaP using biocompatible, magnetic particles asissted impedimetric sensing system. Hydrophobic cell membrane anchors (BAM) were generated onto magnetic particles which diameters vary from 50 nm to 5 μm and were used to capture LNCaP cells from the suspension. Finally, magnetic particle-LNCaP complex were addressed onto the surface of the interdigitated microelectrode (IDM). Cell viability was monitored by our laboratory developed-technique Electrical Cell Substrate Impedance Sensing (ECIS). The results reavealed that 50 nm-magnetic particles showed best performance in terms of cell separation and cell viability. This technique provides a simple and efficient method for the direct addressing of LNCaP cell on the surface and enhances better understanding of cell behavior for cancer management in the near future.

  7. Nondestructive surface profiling of hidden MEMS using an infrared low-coherence interferometric microscope

    Science.gov (United States)

    Krauter, Johann; Osten, Wolfgang

    2018-03-01

    There are a wide range of applications for micro-electro-mechanical systems (MEMS). The automotive and consumer market is the strongest driver for the growing MEMS industry. A 100 % test of MEMS is particularly necessary since these are often used for safety-related purposes such as the ESP (Electronic Stability Program) system. The production of MEMS is a fully automated process that generates 90 % of the costs during the packaging and dicing steps. Nowadays, an electrical test is carried out on each individual MEMS component before these steps. However, after encapsulation, MEMS are opaque to visible light and other defects cannot be detected. Therefore, we apply an infrared low-coherence interferometer for the topography measurement of those hidden structures. A lock-in algorithm-based method is shown to calculate the object height and to reduce ghost steps due to the 2π -unambiguity. Finally, measurements of different MEMS-based sensors are presented.

  8. Unsupervised neural spike sorting for high-density microelectrode arrays with convolutive independent component analysis.

    Science.gov (United States)

    Leibig, Christian; Wachtler, Thomas; Zeck, Günther

    2016-09-15

    Unsupervised identification of action potentials in multi-channel extracellular recordings, in particular from high-density microelectrode arrays with thousands of sensors, is an unresolved problem. While independent component analysis (ICA) achieves rapid unsupervised sorting, it ignores the convolutive structure of extracellular data, thus limiting the unmixing to a subset of neurons. Here we present a spike sorting algorithm based on convolutive ICA (cICA) to retrieve a larger number of accurately sorted neurons than with instantaneous ICA while accounting for signal overlaps. Spike sorting was applied to datasets with varying signal-to-noise ratios (SNR: 3-12) and 27% spike overlaps, sampled at either 11.5 or 23kHz on 4365 electrodes. We demonstrate how the instantaneity assumption in ICA-based algorithms has to be relaxed in order to improve the spike sorting performance for high-density microelectrode array recordings. Reformulating the convolutive mixture as an instantaneous mixture by modeling several delayed samples jointly is necessary to increase signal-to-noise ratio. Our results emphasize that different cICA algorithms are not equivalent. Spike sorting performance was assessed with ground-truth data generated from experimentally derived templates. The presented spike sorter was able to extract ≈90% of the true spike trains with an error rate below 2%. It was superior to two alternative (c)ICA methods (≈80% accurately sorted neurons) and comparable to a supervised sorting. Our new algorithm represents a fast solution to overcome the current bottleneck in spike sorting of large datasets generated by simultaneous recording with thousands of electrodes. Copyright © 2016 Elsevier B.V. All rights reserved.

  9. Impedimetric microbial biosensor based on single wall carbon nanotube modified microelectrodes for trichloroethylene detection

    International Nuclear Information System (INIS)

    Hnaien, M.; Bourigua, S.; Bessueille, F.; Bausells, J.; Errachid, A.; Lagarde, F.; Jaffrezic-Renault, N.

    2011-01-01

    Highlights: ► We propose an impedimetric microbial biosensor for trichloroethylene detection. ► A new transducer modified with carbon nanotubes and Pseudomonas putida is evaluated. ► Functionalization steps are controlled by impedance spectroscopy and AFM. ► The biosensor offers good sensitivity, selectivity, linear range and stability. ► The biosensor is successfully applied to spiked natural water samples. - Abstract: Contamination of soils and groundwaters with persistent organic pollutants is a matter of increasing concern. The most common organic pollutants are chlorinated hydrocarbons such as perchloroethylene and trichloroethylene (TCE). In this study, we developed a bacterial impedimetric biosensor for TCE detection, based on the immobilization of Pseudomonas putida F1 strain on gold microelectrodes functionalized with single wall carbon nanotubes covalently linked to anti-Pseudomonas antibodies. The different steps of microelectrodes functionalization were characterized by electrochemical impedance and atomic force spectroscopies, and analytical performances of the developed microbial biosensor were determined. The impedimetric biosensor response was linear with TCE concentration up to 150 μg L −1 and a low limit of detection (20 μg L −1 ) was achieved. No significant loss of signal was observed after 4 weeks of storage at 4 °C in phosphate buffer saline pH 7 (three to four measurements a week). After 5 weeks, 90% of the initial value still remained. cis-1,2-Dichloroethylene and vinylchloride, the main TCE degradation products, did not significantly interfere with TCE. The microbial sensor was finally applied to the determination of TCE in natural water samples spiked at the 30, 50 and 75 μg L −1 levels. Recoveries were very good, ranging from 100 to 103%.

  10. Lower layers in the motor cortex are more effective targets for penetrating microelectrodes in cortical prostheses

    Science.gov (United States)

    Parikh, Hirak; Marzullo, Timothy C.; Kipke, Daryl R.

    2009-04-01

    Improving cortical prostheses requires the development of recording neural interfaces that are efficient in terms of providing maximal control information with minimal interface complexity. While the typical approaches have targeted neurons in the motor cortex with multiple penetrating shanks, an alternative approach is to determine an efficient distribution of electrode sites within the layers of the cortex with fewer penetrating shanks. The objective of this study was to compare unit activity in the upper and lower layers of the cortex with respect to movement and direction in order to inform the design of penetrating microelectrodes. Four rats were implanted bilaterally with multi-site single-shank silicon microelectrode arrays in the neck/shoulder region of the motor cortex. We simultaneously recorded unit activity across all layers of the motor cortex while the animal was engaged in a movement direction task. Localization of the electrode array within the different layers of the cortex was determined by histology. We denoted units from layers 2 and 3 and units as upper layer units, and units from layers 5 and 6 as lower layer units. Analysis of unit spiking activity demonstrated that both the upper and lower layers encode movement and direction information. Unit responses in either cortical layer of the cortex were not preferentially associated with contralateral or ipsilateral movement. Aggregate analysis (633 neurons) and best session analysis (75 neurons) indicated that units in the lower layers (layers 5, 6) are more likely to encode direction information when compared to units in the upper layers (layers 2, 3) (p< 0.05). These results suggest that electrode sites clustered in the lower layers provide access to more salient control information for cortical neuroprostheses.

  11. Fast tunable blazed MEMS grating for external cavity lasers

    Science.gov (United States)

    Tormen, Maurizio; Niedermann, Philippe; Hoogerwerf, Arno; Shea, Herbert; Stanley, Ross

    2017-11-01

    Diffractive MEMS are interesting for a wide range of applications, including displays, scanners or switching elements. Their advantages are compactness, potentially high actuation speed and in the ability to deflect light at large angles. We have designed and fabricated deformable diffractive MEMS grating to be used as tuning elements for external cavity lasers. The resulting device is compact, has wide tunability and a high operating speed. The initial design is a planar grating where the beams are free-standing and attached to each other using leaf springs. Actuation is achieved through two electrostatic comb drives at either end of the grating. To prevent deformation of the free-standing grating, the device is 10 μm thick made from a Silicon on Insulator (SOI) wafer in a single mask process. At 100V a periodicity tuning of 3% has been measured. The first resonant mode of the grating is measured at 13.8 kHz, allowing high speed actuation. This combination of wide tunability and high operating speed represents state of the art in the domain of tunable MEMS filters. In order to improve diffraction efficiency and to expand the usable wavelength range, a blazed version of the deformable MEMS grating has been designed. A key issue is maintaining the mechanical properties of the original device while providing optically smooth blazed beams. Using a process based on anisotropic KOH etching, blazed gratings have been obtained and preliminary characterization is promising.

  12. PECVD silicon carbide surface micromachining technology and selected MEMS applications

    NARCIS (Netherlands)

    Rajaraman, V.; Pakula, L.S.; Yang, H.; French, P.J.; Sarro, P.M.

    2011-01-01

    Attractive material properties of plasma enhanced chemical vapour deposited (PECVD) silicon carbide (SiC) when combined with CMOS-compatible low thermal budget processing provides an ideal technology platform for developing various microelectromechanical systems (MEMS) devices and merging them with

  13. Design and Fabrication of a Reconfigurable MEMS-Based Antenna

    KAUST Repository

    Martinez, Miguel Angel Galicia

    2011-01-01

    According to the high gain obtained in a lossy silicon substrate and the compatibility of the custom MEMS process with the state of the art standard CMOS process, it is believed that the design of this antenna can lead to efficient and low cost reconfigurable millimeter-wave System-on-Chip (SoC) solution.

  14. Triaxial MEMS accelerometer with screen printed PZT thick film

    DEFF Research Database (Denmark)

    Hindrichsen, Christian Carstensen; Almind, Ninia Sejersen; Brodersen, Simon Hedegaard

    2010-01-01

    . In this work integration of a screen printed piezoelectric PZT thick film with silicon MEMS technology is shown. A high bandwidth triaxial accelerometer has been designed, fabricated and characterized. The voltage sensitivity is 0.31 mV/g in the vertical direction, 0.062 mV/g in the horizontal direction...

  15. Model-based design of MEMS resonant pressure sensors

    NARCIS (Netherlands)

    Suijlen, M.A.G.

    2011-01-01

    The massive integration of micromechanical structures on ICs to allow microsystems to sense and control the environment is expected to be one of the most important technological breakthroughs of the future. At present, cheap and small MEMS sensors are emerging in countless applications. Automotive

  16. Modeling of MEMS Mirrors Actuated by Phase-Change Mechanism

    Directory of Open Access Journals (Sweden)

    David Torres

    2017-04-01

    Full Text Available Given the multiple applications for micro-electro-mechanical system (MEMS mirror devices, most of the research efforts are focused on improving device performance in terms of tilting angles, speed, and their integration into larger arrays or systems. The modeling of these devices is crucial for enabling a platform, in particular, by allowing for the future control of such devices. In this paper, we present the modeling of a MEMS mirror structure with four actuators driven by the phase-change of a thin film. The complexity of the device structure and the nonlinear behavior of the actuation mechanism allow for a comprehensive study that encompasses simpler electrothermal designs, thus presenting a general approach that can be adapted to most MEMS mirror designs based on this operation principle. The MEMS mirrors presented in this work are actuated by Joule heating and tested using optical techniques. Mechanical and thermal models including both pitch and roll displacements are developed by combining theoretical analysis (using both numerical and analytical tools with experimental data and subsequently verifying with quasi-static and dynamic experiments.

  17. Measuring time-dependent deformations in metallic MEMS

    NARCIS (Netherlands)

    Bergers, L.I.J.C.; Hoefnagels, J.P.M.; Delhey, N.K.R.; Geers, M.G.D.

    2011-01-01

    The reliability of metallic microelectromechanical systems (MEMS) depends on time-dependent deformation such as creep. Key to this process is the interaction between microstructural length scales and dimensional length scales, so-called size-effects. As a first critical step towards studying these

  18. 3D Printing and Bioprinting in MEMS Technology

    Directory of Open Access Journals (Sweden)

    Chee Kai Chua

    2017-07-01

    Full Text Available 3D printing and bioprinting have advanced significantly in printing resolution in recent years, which presents a great potential for fabricating small and complex features suitable for microelectromechanical systems (MEMS with new functionalities. This special issue aims to give a glimpse into the future of this research field.

  19. MEMS-based microspectrometer technologies for NIR and MIR wavelengths

    International Nuclear Information System (INIS)

    Schuler, Leo P; Milne, Jason S; Dell, John M; Faraone, Lorenzo

    2009-01-01

    Commercially manufactured near-infrared (NIR) instruments became available about 50 years ago. While they have been designed for laboratory use in a controlled environment and boast high performance, they are generally bulky, fragile and maintenance intensive, and therefore expensive to purchase and maintain. Micromachining is a powerful technique to fabricate micromechanical parts such as integrated circuits. It was perfected in the 1980s and led to the invention of micro electro mechanical systems (MEMSs). The three characteristic features of MEMS fabrication technologies are miniaturization, multiplicity and microelectronics. Combined, these features allow the batch production of compact and rugged devices with integrated intelligence. In order to build more compact, more rugged and less expensive NIR instruments, MEMS technology has been successfully integrated into a range of new devices. In the first part of this paper we discuss the UWA MEMS-based Fabry-Perot spectrometer, its design and issues to be solved. MEMS-based Fabry-Perot filters primarily isolate certain wavelengths by sweeping across an incident spectrum and the resulting monochromatic signal is detected by a broadband detector. In the second part, we discuss other microspectrometers including other Fabry-Perot spectrometer designs, time multiplexing devices and mixed time/space multiplexing devices. (topical review)

  20. Olhar do cronista, registro da memória

    Directory of Open Access Journals (Sweden)

    Angela Maria Dutra da Silva Senra

    2016-09-01

    Full Text Available Propomos apresentar a pesquisa “Rastros da memória literária em crônicas dos jornais marianenses dos séculos XIX e XX” (PERPÉTUA, 2015, que tem como fonte um acervo de periódicos da cidade de Mariana (MG, hoje sob a guarda do Centro de Pesquisas Linguagem, Memória e Tradução do ICHS-UFOP. Dada a evidente relação desse acervo com a memória sociocultural da cidade, nossa pesquisa, em andamento, volta-se objetivamente para identificar e selecionar crônicas literárias publicadas nos periódicos, com a subsequente análise em sua correlação com a memória da região, sob as bases de um significativo material teórico sobre esse gênero. Assim, com vistas a adentrar no passado memorial da cidade de Mariana, apresentaremos o resultado parcial da nossa investigação, que tem proporcionado o conhecimento acerca da crônica; e do registro memorial dessa cidade em razão de sua importância no cenário histórico, social e cultural de Minas Gerais.