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Sample records for mems deformable mirror

  1. 10^3 Segment MEMS Deformable-Mirror Process Development, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — Iris AO will extend its proven segmented MEMS deformable mirror architecture to large array sizes required for high-contrast astrophysical imagers. Current...

  2. Modeling, Calibration and Control for Extreme-Precision MEMS Deformable Mirrors, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — Iris AO will develop electromechanical models and actuator calibration methods to enable open-loop control of MEMS deformable mirrors (DMs) with unprecedented...

  3. Payload characterization for CubeSat demonstration of MEMS deformable mirrors

    Science.gov (United States)

    Marinan, Anne; Cahoy, Kerri; Webber, Matthew; Belikov, Ruslan; Bendek, Eduardo

    2014-08-01

    Coronagraphic space telescopes require wavefront control systems for high-contrast imaging applications such as exoplanet direct imaging. High-actuator-count MEMS deformable mirrors (DM) are a key element of these wavefront control systems yet have not been flown in space long enough to characterize their on-orbit performance. The MEMS Deformable Mirror CubeSat Testbed is a conceptual nanosatellite demonstration of MEMS DM and wavefront sensing technology. The testbed platform is a 3U CubeSat bus. Of the 10 x 10 x 34.05 cm (3U) available volume, a 10 x 10 x 15 cm space is reserved for the optical payload. The main purpose of the payload is to characterize and calibrate the onorbit performance of a MEMS deformable mirror over an extended period of time (months). Its design incorporates both a Shack Hartmann wavefront sensor (internal laser illumination), and a focal plane sensor (used with an external aperture to image bright stars). We baseline a 32-actuator Boston Micromachines Mini deformable mirror for this mission, though the design is flexible and can be applied to mirrors from other vendors. We present the mission design and payload architecture and discuss experiment design, requirements, and performance simulations.

  4. Ultraflat Tip-Tilt-Piston MEMS Deformable Mirror, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — It is proposed to develop a process for producing arrays of hexagonal mirror segments with deviation from flatness smaller than 1nm RMS over a 600?m segment span,...

  5. Stroke saturation on a MEMS deformable mirror for woofer-tweeter adaptive optics.

    Science.gov (United States)

    Morzinski, Katie; Macintosh, Bruce; Gavel, Donald; Dillon, Daren

    2009-03-30

    High-contrast imaging of extrasolar planet candidates around a main-sequence star has recently been realized from the ground using current adaptive optics (AO) systems. Advancing such observations will be a task for the Gemini Planet Imager, an upcoming "extreme" AO instrument. High-order "tweeter" and low-order "woofer" deformable mirrors (DMs) will supply a >90%-Strehl correction, a specialized coronagraph will suppress the stellar flux, and any planets can then be imaged in the "dark hole" region. Residual wavefront error scatters light into the DM-controlled dark hole, making planets difficult to image above the noise. It is crucial in this regard that the high-density tweeter, a micro-electrical mechanical systems (MEMS) DM, have sufficient stroke to deform to the shapes required by atmospheric turbulence. Laboratory experiments were conducted to determine the rate and circumstance of saturation, i.e. stroke insufficiency. A 1024-actuator 1.5-microm-stroke MEMS device was empirically tested with software Kolmogorov-turbulence screens of r(0) =10-15 cm. The MEMS when solitary suffered saturation approximately 4% of the time. Simulating a woofer DM with approximately 5-10 actuators across a 5-m primary mitigated MEMS saturation occurrence to a fraction of a percent. While no adjacent actuators were saturated at opposing positions, mid-to-high-spatial-frequency stroke did saturate more frequently than expected, implying that correlations through the influence functions are important. Analytical models underpredict the stroke requirements, so empirical studies are important.

  6. Optical zoom lens module using MEMS deformable mirrors for portable device

    Science.gov (United States)

    Lu, Jia-Shiun; Su, Guo-Dung J.

    2012-10-01

    The thickness of the smart phones in today's market is usually below than 10 mm, and with the shrinking of the phone volume, the difficulty of its production of the camera lens has been increasing. Therefore, how to give the imaging device more functionality in the smaller space is one of the interesting research topics for today's mobile phone companies. In this paper, we proposed a thin optical zoom system which is combined of micro-electromechanical components and reflective optical architecture. By the adopting of the MEMS deformable mirrors, we can change their radius of curvature to reach the optical zoom in and zoom out. And because we used the all-reflective architecture, so this system has eliminated the considerable chromatic aberrations in the absence of lenses. In our system, the thickness of the zoom system is about 11 mm. The smallest EFL (effective focal length) is 4.61 mm at a diagonal field angle of 52° and f/# of 5.24. The longest EFL of the module is 9.22 mm at a diagonal field angle of 27.4 with f/# of 5.03.°

  7. High Speed Magnetostrictive MEMS Actuated Mirror Deflectors, Phase II

    Data.gov (United States)

    National Aeronautics and Space Administration — The main goal of this proposal is to develop high speed magnetostrictive and MEMS actuators for rapidly deflecting or deforming mirrors. High speed, light-weight,...

  8. Advanced Curvature Deformable Mirrors

    Science.gov (United States)

    2010-09-01

    ORGANIZATION NAME(S) AND ADDRESS(ES) University of Hawaii ,Institute for Astronomy,640 North A‘ohoku Place, #209 , Hilo ,HI,96720-2700 8. PERFORMING...Advanced Curvature Deformable Mirrors Christ Ftaclas1,2, Aglae Kellerer2 and Mark Chun2 Institute for Astronomy, University of Hawaii

  9. Impact of large field angles on the requirements for deformable mirror in imaging satellites

    Science.gov (United States)

    Kim, Jae Jun; Mueller, Mark; Martinez, Ty; Agrawal, Brij

    2018-04-01

    For certain imaging satellite missions, a large aperture with wide field-of-view is needed. In order to achieve diffraction limited performance, the mirror surface Root Mean Square (RMS) error has to be less than 0.05 waves. In the case of visible light, it has to be less than 30 nm. This requirement is difficult to meet as the large aperture will need to be segmented in order to fit inside a launch vehicle shroud. To reduce this requirement and to compensate for the residual wavefront error, Micro-Electro-Mechanical System (MEMS) deformable mirrors can be considered in the aft optics of the optical system. MEMS deformable mirrors are affordable and consume low power, but are small in size. Due to the major reduction in pupil size for the deformable mirror, the effective field angle is magnified by the diameter ratio of the primary and deformable mirror. For wide field of view imaging, the required deformable mirror correction is field angle dependant, impacting the required parameters of a deformable mirror such as size, number of actuators, and actuator stroke. In this paper, a representative telescope and deformable mirror system model is developed and the deformable mirror correction is simulated to study the impact of the large field angles in correcting a wavefront error using a deformable mirror in the aft optics.

  10. Modeling of biaxial gimbal-less MEMS scanning mirrors

    Science.gov (United States)

    von Wantoch, Thomas; Gu-Stoppel, Shanshan; Senger, Frank; Mallas, Christian; Hofmann, Ulrich; Meurer, Thomas; Benecke, Wolfgang

    2016-03-01

    One- and two-dimensional MEMS scanning mirrors for resonant or quasi-stationary beam deflection are primarily known as tiny micromirror devices with aperture sizes up to a few Millimeters and usually address low power applications in high volume markets, e.g. laser beam scanning pico-projectors or gesture recognition systems. In contrast, recently reported vacuum packaged MEMS scanners feature mirror diameters up to 20 mm and integrated high-reflectivity dielectric coatings. These mirrors enable MEMS based scanning for applications that require large apertures due to optical constraints like 3D sensing or microscopy as well as for high power laser applications like laser phosphor displays, automotive lighting and displays, 3D printing and general laser material processing. This work presents modelling, control design and experimental characterization of gimbal-less MEMS mirrors with large aperture size. As an example a resonant biaxial Quadpod scanner with 7 mm mirror diameter and four integrated PZT (lead zirconate titanate) actuators is analyzed. The finite element method (FEM) model developed and computed in COMSOL Multiphysics is used for calculating the eigenmodes of the mirror as well as for extracting a high order (n system inputs and scanner displacement as system output. By applying model order reduction techniques using MATLABR a compact state space system approximation of order n = 6 is computed. Based on this reduced order model feedforward control inputs for different, properly chosen scanner displacement trajectories are derived and tested using the original FEM model as well as the micromirror.

  11. Lead salt resonant cavity enhanced detector with MEMS mirror

    Science.gov (United States)

    Felder, F.; Fill, M.; Rahim, M.; Zogg, H.; Quack, N.; Blunier, S.; Dual, J.

    2010-01-01

    We describe a tunable resonant cavity enhanced detector (RCED) for the mid-infrared employing narrow gap lead-chalcogenide (IV-VI) layers on a Si substrate. The device consists of an epitaxial Bragg reflector layer, a thin p-n+ heterojunction with PbSrTe as detecting layer and a micro-electro-mechanical system (MEMS) micromirror as second mirror. Despite the thin absorber layer the sensitivity is even higher than for a conventional detector. Tunability is achieved by changing the cavity length with a vertically movable MEMS mirror. The device may be used as miniature infrared spectrometer to cover the spectral range from 30 μm.

  12. Modeling of MEMS Mirrors Actuated by Phase-Change Mechanism

    Directory of Open Access Journals (Sweden)

    David Torres

    2017-04-01

    Full Text Available Given the multiple applications for micro-electro-mechanical system (MEMS mirror devices, most of the research efforts are focused on improving device performance in terms of tilting angles, speed, and their integration into larger arrays or systems. The modeling of these devices is crucial for enabling a platform, in particular, by allowing for the future control of such devices. In this paper, we present the modeling of a MEMS mirror structure with four actuators driven by the phase-change of a thin film. The complexity of the device structure and the nonlinear behavior of the actuation mechanism allow for a comprehensive study that encompasses simpler electrothermal designs, thus presenting a general approach that can be adapted to most MEMS mirror designs based on this operation principle. The MEMS mirrors presented in this work are actuated by Joule heating and tested using optical techniques. Mechanical and thermal models including both pitch and roll displacements are developed by combining theoretical analysis (using both numerical and analytical tools with experimental data and subsequently verifying with quasi-static and dynamic experiments.

  13. High-resolution adaptive optics scanning laser ophthalmoscope with multiple deformable mirrors

    Science.gov (United States)

    Chen, Diana C.; Olivier, Scot S.; Jones; Steven M.

    2010-02-23

    An adaptive optics scanning laser ophthalmoscopes is introduced to produce non-invasive views of the human retina. The use of dual deformable mirrors improved the dynamic range for correction of the wavefront aberrations compared with the use of the MEMS mirror alone, and improved the quality of the wavefront correction compared with the use of the bimorph mirror alone. The large-stroke bimorph deformable mirror improved the capability for axial sectioning with the confocal imaging system by providing an easier way to move the focus axially through different layers of the retina.

  14. Centimeter-scale MEMS scanning mirrors for high power laser application

    Science.gov (United States)

    Senger, F.; Hofmann, U.; v. Wantoch, T.; Mallas, C.; Janes, J.; Benecke, W.; Herwig, Patrick; Gawlitza, P.; Ortega-Delgado, M.; Grune, C.; Hannweber, J.; Wetzig, A.

    2015-02-01

    A higher achievable scan speed and the capability to integrate two scan axes in a very compact device are fundamental advantages of MEMS scanning mirrors over conventional galvanometric scanners. There is a growing demand for biaxial high speed scanning systems complementing the rapid progress of high power lasers for enabling the development of new high throughput manufacturing processes. This paper presents concept, design, fabrication and test of biaxial large aperture MEMS scanning mirrors (LAMM) with aperture sizes up to 20 mm for use in high-power laser applications. To keep static and dynamic deformation of the mirror acceptably low all MEMS mirrors exhibit full substrate thickness of 725 μm. The LAMM-scanners are being vacuum packaged on wafer-level based on a stack of 4 wafers. Scanners with aperture sizes up to 12 mm are designed as a 4-DOF-oscillator with amplitude magnification applying electrostatic actuation for driving a motor-frame. As an example a 7-mm-scanner is presented that achieves an optical scan angle of 32 degrees at 3.2 kHz. LAMM-scanners with apertures sizes of 20 mm are designed as passive high-Q-resonators to be externally excited by low-cost electromagnetic or piezoelectric drives. Multi-layer dielectric coatings with a reflectivity higher than 99.9 % have enabled to apply cw-laser power loads of more than 600 W without damaging the MEMS mirror. Finally, a new excitation concept for resonant scanners is presented providing advantageous shaping of intensity profiles of projected laser patterns without modulating the laser. This is of interest in lighting applications such as automotive laser headlights.

  15. Fabrication Process Development for Light Deformable Mirrors

    Data.gov (United States)

    National Aeronautics and Space Administration — The project objective is to develop robust, reproductibble fabrication processes to realize functional deformable membrane mirrors (DM) for a space mission in which...

  16. Thermomechanical characterization of a membrane deformable mirror

    International Nuclear Information System (INIS)

    Morse, Kathleen A.; McHugh, Stuart L.; Fixler, Jeff

    2008-01-01

    A membrane deformable mirror has been investigated for its potential use in high-energy laser systems. Experiments were performed in which the deformable mirror was heated with a 1 kW incandescent lamp and the thermal profile, the wavefront aberrations, and the mechanical displacement of the membrane were measured. A finite element model was also developed. The wavefront characterization experiments showed that the wavefront degraded with heating. Above a temperature of 35 deg. C, the wavefront characterization experiments indicated a dramatic increase in the high-order wavefront modes before the optical beam became immeasurable in the sensors. The mechanical displacement data of the membrane mirror showed that during heating, the membrane initially deflected towards the heat source and then deflected away from the heat source. Finite element analysis (FEA) predicted a similar displacement behavior as shown by the mechanical displacement data but over a shorter time scale and a larger magnitude. The mechanical displacement data also showed that the magnitude of membrane displacement increased with the experiments that involved higher temperatures. Above a temperature of 35 deg. C, the displacement data showed that random deflections as a function of time developed and that the magnitude of these deflections increased with increased temperature. We concluded that convection, not captured in the FEA, likely played a dominant role in mirror deformation at temperatures above 35 deg. C

  17. All-optical photoacoustic microscopy using a MEMS scanning mirror

    Science.gov (United States)

    Chen, Sung-Liang; Xie, Zhixing; Ling, Tao; Wei, Xunbin; Guo, L. Jay; Wang, Xueding

    2013-03-01

    It has been studied that a potential marker to obtain prognostic information about bladder cancer is tumor neoangiogenesis, which can be quantified by morphometric characteristics such as microvascular density. Photoacoustic microscopy (PAM) can render sensitive three-dimensional (3D) mapping of microvasculature, providing promise to evaluate the neoangiogenesis that is closely related to the diagnosis of bladder cancer. To ensure good image quality, it is desired to acquire bladder PAM images from its inside via the urethra, like conventional cystoscope. Previously, we demonstrated all-optical PAM systems using polymer microring resonators to detect photoacoustic signals and galvanometer mirrors for laser scanning. In this work, we build a miniature PAM system using a microelectromechanical systems (MEMS) scanning mirror, demonstrating a prototype of an endoscopic PAM head capable of high imaging quality of the bladder. The system has high resolutions of 17.5 μm in lateral direction and 19 μm in the axial direction at a distance of 5.4 mm. Images of printed grids and the 3D structure of microvasculature in animal bladders ex vivo by the system are demonstrated.

  18. Measuring time-dependent deformations in metallic MEMS

    NARCIS (Netherlands)

    Bergers, L.I.J.C.; Hoefnagels, J.P.M.; Delhey, N.K.R.; Geers, M.G.D.

    2011-01-01

    The reliability of metallic microelectromechanical systems (MEMS) depends on time-dependent deformation such as creep. Key to this process is the interaction between microstructural length scales and dimensional length scales, so-called size-effects. As a first critical step towards studying these

  19. Piezoelectric deformable mirror for intra-cavity laser adaptive optics.

    CSIR Research Space (South Africa)

    Long, CS

    2008-03-01

    Full Text Available This paper describes the development of a deformable mirror to be used in conjunction with diffractive optical elements inside a laser cavity. A prototype piezoelectric unimorph adaptive mirror was developed to correct for time dependent phase...

  20. Design of the deformable mirror demonstration CubeSat (DeMi)

    Science.gov (United States)

    Douglas, Ewan S.; Allan, Gregory; Barnes, Derek; Figura, Joseph S.; Haughwout, Christian A.; Gubner, Jennifer N.; Knoedler, Alex A.; LeClair, Sarah; Murphy, Thomas J.; Skouloudis, Nikolaos; Merck, John; Opperman, Roedolph A.; Cahoy, Kerri L.

    2017-09-01

    The Deformable Mirror Demonstration Mission (DeMi) was recently selected by DARPA to demonstrate in-space operation of a wavefront sensor and Microelectromechanical system (MEMS) deformable mirror (DM) payload on a 6U CubeSat. Space telescopes designed to make high-contrast observations using internal coronagraphs for direct characterization of exoplanets require the use of high-actuator density deformable mirrors. These DMs can correct image plane aberrations and speckles caused by imperfections, thermal distortions, and diffraction in the telescope and optics that would otherwise corrupt the wavefront and allow leaking starlight to contaminate coronagraphic images. DeMi is provide on-orbit demonstration and performance characterization of a MEMS deformable mirror and closed loop wavefront sensing. The DeMi payload has two operational modes, one mode that images an internal light source and another mode which uses an external aperture to images stars. Both the internal and external modes include image plane and pupil plane wavefront sensing. The objectives of the internal measurement of the 140-actuator MEMS DM actuator displacement are characterization of the mirror performance and demonstration of closed-loop correction of aberrations in the optical path. Using the external aperture to observe stars of magnitude 2 or brighter, assuming 3-axis stability with less than 0.1 degree of attitude knowledge and jitter below 10 arcsec RMSE, per observation, DeMi will also demonstrate closed loop wavefront control on an astrophysical target. We present an updated payload design, results from simulations and laboratory optical prototyping, as well as present our design for accommodating high-voltage multichannel drive electronics for the DM on a CubeSat.

  1. Advanced Actuator Concepts for High Precision Deformable Mirrors, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — TRS Technologies proposes to develop a variety of single crystal actuators for adaptive optics deformable mirrors. Single crystal piezoelectric actuators are...

  2. Actuators of 3-element unimorph deformable mirror

    Science.gov (United States)

    Fu, Tianyang; Ning, Yu; Du, Shaojun

    2016-10-01

    Kinds of wavefront aberrations exist among optical systems because of atmosphere disturbance, device displacement and a variety of thermal effects, which disturb the information of transmitting beam and restrain its energy. Deformable mirror(DM) is designed to adjust these wavefront aberrations. Bimorph DM becomes more popular and more applicable among adaptive optical(AO) systems with advantages in simple structure, low cost and flexible design compared to traditional discrete driving DM. The defocus aberration accounted for a large proportion of all wavefront aberrations, with a simpler surface and larger amplitude than others, so it is very useful to correct the defocus aberration effectively for beam controlling and aberration adjusting of AO system. In this study, we desired on correcting the 3rd and 10th Zernike modes, analyze the characteristic of the 3rd and 10th defocus aberration surface distribution, design 3-element actuators unimorph DM model study on its structure and deformation principle theoretically, design finite element models of different electrode configuration with different ring diameters, analyze and compare effects of different electrode configuration and different fixing mode to DM deformation capacity through COMSOL finite element software, compare fitting efficiency of DM models to the 3rd and 10th Zernike modes. We choose the inhomogeneous electrode distribution model with better result, get the influence function of every electrode and the voltage-PV relationship of the model. This unimorph DM is suitable for the AO system with a mainly defocus aberration.

  3. Terahertz adaptive optics with a deformable mirror.

    Science.gov (United States)

    Brossard, Mathilde; Sauvage, Jean-François; Perrin, Mathias; Abraham, Emmanuel

    2018-04-01

    We report on the wavefront correction of a terahertz (THz) beam using adaptive optics, which requires both a wavefront sensor that is able to sense the optical aberrations, as well as a wavefront corrector. The wavefront sensor relies on a direct 2D electro-optic imaging system composed of a ZnTe crystal and a CMOS camera. By measuring the phase variation of the THz electric field in the crystal, we were able to minimize the geometrical aberrations of the beam, thanks to the action of a deformable mirror. This phase control will open the route to THz adaptive optics in order to optimize the THz beam quality for both practical and fundamental applications.

  4. A Fourier Transform Spectrometer Based on an Electrothermal MEMS Mirror with Improved Linear Scan Range

    Directory of Open Access Journals (Sweden)

    Wei Wang

    2016-09-01

    Full Text Available A Fourier transform spectrometer (FTS that incorporates a closed-loop controlled, electrothermally actuated microelectromechanical systems (MEMS micromirror is proposed and experimentally verified. The scan range and the tilting angle of the mirror plate are the two critical parameters for MEMS-based FTS. In this work, the MEMS mirror with a footprint of 4.3 mm × 3.1 mm is based on a modified lateral-shift-free (LSF bimorph actuator design with large piston and reduced tilting. Combined with a position-sensitive device (PSD for tilt angle sensing, the feedback controlled MEMS mirror generates a 430 µm stable linear piston scan with the mirror plate tilting angle less than ±0.002°. The usable piston scan range is increased to 78% of the MEMS mirror’s full scan capability, and a spectral resolution of 0.55 nm at 531.9 nm wavelength, has been achieved. It is a significant improvement compared to the prior work.

  5. Overview of deformable mirror technologies for adaptive optics and astronomy

    Science.gov (United States)

    Madec, P.-Y.

    2012-07-01

    From the ardent bucklers used during the Syracuse battle to set fire to Romans’ ships to more contemporary piezoelectric deformable mirrors widely used in astronomy, from very large voice coil deformable mirrors considered in future Extremely Large Telescopes to very small and compact ones embedded in Multi Object Adaptive Optics systems, this paper aims at giving an overview of Deformable Mirror technology for Adaptive Optics and Astronomy. First the main drivers for the design of Deformable Mirrors are recalled, not only related to atmospheric aberration compensation but also to environmental conditions or mechanical constraints. Then the different technologies available today for the manufacturing of Deformable Mirrors will be described, pros and cons analyzed. A review of the Companies and Institutes with capabilities in delivering Deformable Mirrors to astronomers will be presented, as well as lessons learned from the past 25 years of technological development and operation on sky. In conclusion, perspective will be tentatively drawn for what regards the future of Deformable Mirror technology for Astronomy.

  6. Nonlinear Dynamic Behavior of a Bi-Axial Torsional MEMS Mirror with Sidewall Electrodes

    Directory of Open Access Journals (Sweden)

    Mehmet Ozdogan

    2016-03-01

    Full Text Available Nonlinear dynamic responses of a Micro-Electro-Mechanical Systems (MEMS mirror with sidewall electrodes are presented that are in close agreement with previously-reported experimental data. An analysis of frequency responses reveals softening behavior, and secondary resonances originated from the dominant quadratic nonlinearity. The quadratic nonlinearity is an electromechanical coupling effect caused by the electrostatic force. This effect is reflected in our mathematical model used to simulate the dynamic response of the micro-mirror. The effects of increased forcing and decreased damping on the frequency response are investigated as the mirrors are mostly used in vacuum packages. The results can predict MEMS mirror behaviors in optical devices better than previously-reported models.

  7. UAV-borne lidar with MEMS mirror-based scanning capability

    Science.gov (United States)

    Kasturi, Abhishek; Milanovic, Veljko; Atwood, Bryan H.; Yang, James

    2016-05-01

    Firstly, we demonstrated a wirelessly controlled MEMS scan module with imaging and laser tracking capability which can be mounted and flown on a small UAV quadcopter. The MEMS scan module was reduced down to a small volume of smartphone via Bluetooth while flying on a drone, and could project vector content, text, and perform laser based tracking. Also, a "point-and-range" LiDAR module was developed for UAV applications based on low SWaP (Size, Weight and Power) gimbal-less MEMS mirror beam-steering technology and off-the-shelf OEM LRF modules. For demonstration purposes of an integrated laser range finder module, we used a simple off-the-shelf OEM laser range finder (LRF) with a 100m range, +/-1.5mm accuracy, and 4Hz ranging capability. The LRFs receiver optics were modified to accept 20° of angle, matching the transmitter's FoR. A relatively large (5.0mm) diameter MEMS mirror with +/-10° optical scanning angle was utilized in the demonstration to maintain the small beam divergence of the module. The complete LiDAR prototype can fit into a small volume of battery. The MEMS mirror based LiDAR system allows for ondemand ranging of points or areas within the FoR without altering the UAV's position. Increasing the LRF ranging frequency and stabilizing the pointing of the laser beam by utilizing the onboard inertial sensors and the camera are additional goals of the next design.

  8. FEM correlation and shock analysis of a VNC MEMS mirror segment

    Science.gov (United States)

    Aguayo, Eduardo J.; Lyon, Richard; Helmbrecht, Michael; Khomusi, Sausan

    2014-08-01

    Microelectromechanical systems (MEMS) are becoming more prevalent in today's advanced space technologies. The Visible Nulling Coronagraph (VNC) instrument, being developed at the NASA Goddard Space Flight Center, uses a MEMS Mirror to correct wavefront errors. This MEMS Mirror, the Multiple Mirror Array (MMA), is a key component that will enable the VNC instrument to detect Jupiter and ultimately Earth size exoplanets. Like other MEMS devices, the MMA faces several challenges associated with spaceflight. Therefore, Finite Element Analysis (FEA) is being used to predict the behavior of a single MMA segment under different spaceflight-related environments. Finite Element Analysis results are used to guide the MMA design and ensure its survival during launch and mission operations. A Finite Element Model (FEM) has been developed of the MMA using COMSOL. This model has been correlated to static loading on test specimens. The correlation was performed in several steps—simple beam models were correlated initially, followed by increasingly complex and higher fidelity models of the MMA mirror segment. Subsequently, the model has been used to predict the dynamic behavior and stresses of the MMA segment in a representative spaceflight mechanical shock environment. The results of the correlation and the stresses associated with a shock event are presented herein.

  9. A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph

    Directory of Open Access Journals (Sweden)

    Xiaoyang Zhang

    2015-12-01

    Full Text Available This paper reports a large-range electrothermal bimorph microelectromechanical systems (MEMS mirror with fast thermal response. The actuator of the MEMS mirror is made of three segments of Cu/W bimorphs for lateral shift cancelation and two segments of multimorph beams for obtaining large vertical displacement from the angular motion of the bimorphs. The W layer is also used as the embedded heater. The silicon underneath the entire actuator is completely removed using a unique backside deep-reactive-ion-etching DRIE release process, leading to improved thermal response speed and front-side mirror surface protection. This MEMS mirror can perform both piston and tip-tilt motion. The mirror generates large pure vertical displacement up to 320 μm at only 3 V with a power consumption of 56 mW for each actuator. The maximum optical scan angle achieved is ±18° at 3 V. The measured thermal response time is 15.4 ms and the mechanical resonances of piston and tip-tilt modes are 550 Hz and 832 Hz, respectively.

  10. Distributed sensing signal analysis of deformable plate/membrane mirrors

    Science.gov (United States)

    Lu, Yifan; Yue, Honghao; Deng, Zongquan; Tzou, Hornsen

    2017-11-01

    Deformable optical mirrors usually play key roles in aerospace and optical structural systems applied to space telescopes, radars, solar collectors, communication antennas, etc. Limited by the payload capacity of current launch vehicles, the deformable mirrors should be lightweight and are generally made of ultra-thin plates or even membranes. These plate/membrane mirrors are susceptible to external excitations and this may lead to surface inaccuracy and jeopardize relevant working performance. In order to investigate the modal vibration characteristics of the mirror, a piezoelectric layer is fully laminated on its non-reflective side to serve as sensors. The piezoelectric layer is segmented into infinitesimal elements so that microscopic distributed sensing signals can be explored. In this paper, the deformable mirror is modeled as a pre-tensioned plate and membrane respectively and sensing signal distributions of the two models are compared. Different pre-tensioning forces are also applied to reveal the tension effects on the mode shape and sensing signals of the mirror. Analytical results in this study could be used as guideline of optimal sensor/actuator placement for deformable space mirrors.

  11. Zernike polynomial based Rayleigh-Ritz model of a piezoelectric unimorph deformable mirror

    CSIR Research Space (South Africa)

    Long, CS

    2012-04-01

    Full Text Available Piezoelectric bimorph- or unimorph-type deformable mirrors are commonly used in adaptive optics to correct for time-dependent phase aberrations. In the optics community, the surface deformations that deformable mirrors are required to achieve...

  12. Chip-To-Chip Optical Interconnection Using MEMS Mirrors

    Science.gov (United States)

    2009-03-26

    power generated through a resistor is a function of this common current but different resistances, different amounts of heat are generated in the two...Chiu, “Modeling and control of piezo - electric cantilever beam micro mirror and micro laser arrays to reduce image band- ing in electrophotographic

  13. Design and Modeling of Polysilicon Electrothermal Actuators for a MEMS Mirror with Low Power Consumption

    Directory of Open Access Journals (Sweden)

    Miguel Lara-Castro

    2017-06-01

    Full Text Available Endoscopic optical-coherence tomography (OCT systems require low cost mirrors with small footprint size, out-of-plane deflections and low bias voltage. These requirements can be achieved with electrothermal actuators based on microelectromechanical systems (MEMS. We present the design and modeling of polysilicon electrothermal actuators for a MEMS mirror (100 μm × 100 μm × 2.25 μm. These actuators are composed by two beam types (2.25 μm thickness with different cross-section area, which are separated by 2 μm gap. The mirror and actuators are designed through the Sandia Ultra-planar Multi-level MEMS Technology V (SUMMiT V® process, obtaining a small footprint size (1028 μm × 1028 µm for actuators of 550 µm length. The actuators have out-of-plane displacements caused by low dc voltages and without use material layers with distinct thermal expansion coefficients. The temperature behavior along the actuators is calculated through analytical models that include terms of heat energy generation, heat conduction and heat energy loss. The force method is used to predict the maximum out-of-plane displacements in the actuator tip as function of supplied voltage. Both analytical models, under steady-state conditions, employ the polysilicon resistivity as function of the temperature. The electrothermal-and structural behavior of the actuators is studied considering different beams dimensions (length and width and dc bias voltages from 0.5 to 2.5 V. For 2.5 V, the actuator of 550 µm length reaches a maximum temperature, displacement and electrical power of 115 °C, 10.3 µm and 6.3 mW, respectively. The designed actuation mechanism can be useful for MEMS mirrors of different sizes with potential application in endoscopic OCT systems that require low power consumption.

  14. Scanning fiber microdisplay: design, implementation, and comparison to MEMS mirror-based scanning displays.

    Science.gov (United States)

    Khayatzadeh, Ramin; Civitci, Fehmi; Ferhanoglu, Onur; Urey, Hakan

    2018-03-05

    In this study, we propose a compact, lightweight scanning fiber microdisplay towards virtual and augmented reality applications. Our design that is tailored as a head-worn-display simply consists of a four-quadrant piezoelectric tube actuator through which a fiber optics cable is extended and actuated, and a reflective (or semi-reflective) ellipsoidal surface that relays the moving tip of the fiber onto the viewer's retina. The proposed display, offers significant advantages in terms of architectural simplicity, form-factor, fabrication complexity and cost over other fiber scanner and MEMS mirror counterparts towards practical realization. We demonstrate the display of various patterns with ∼VGA resolution and further provide analytical formulas for mechanical and optical constraints to compare the performance of the proposed scanning fiber microdisplay with that of MEMS mirror-based microdisplays. Also we discuss the road steps towards improving the performance of the proposed scanning fiber microdisplay to high-definition video formats (such as HD1440), which is beyond what has been achieved by MEMS mirror based laser scanning displays.

  15. 5 V Compatible Two-Axis PZT Driven MEMS Scanning Mirror with Mechanical Leverage Structure for Miniature LiDAR Application.

    Science.gov (United States)

    Ye, Liangchen; Zhang, Gaofei; You, Zheng

    2017-03-05

    The MEMS (Micro-Electronical Mechanical System) scanning mirror is an optical MEMS device that can scan laser beams across one or two dimensions. MEMS scanning mirrors can be applied in a variety of applications, such as laser display, bio-medical imaging and Light Detection and Ranging (LiDAR). These commercial applications have recently created a great demand for low-driving-voltage and low-power MEMS mirrors. However, no reported two-axis MEMS scanning mirror is available for usage in a universal supplying voltage such as 5 V. In this paper, we present an ultra-low voltage driven two-axis MEMS scanning mirror which is 5 V compatible. In order to realize low voltage and low power, a two-axis MEMS scanning mirror with mechanical leverage driven by PZT (Lead zirconate titanate) ceramic is designed, modeled, fabricated and characterized. To further decrease the power of the MEMS scanning mirror, a new method of impedance matching for PZT ceramic driven by a two-frequency mixed signal is established. As experimental results show, this MEMS scanning mirror reaches a two-axis scanning angle of 41.9° × 40.3° at a total driving voltage of 4.2 Vpp and total power of 16 mW. The effective diameter of reflection of the mirror is 2 mm and the operating frequencies of two-axis scanning are 947.51 Hz and 1464.66 Hz, respectively.

  16. Deformable mirrors : Design fundamentals for force actuation of continuous facesheets

    NARCIS (Netherlands)

    Ravensbergen, S.K.; Hamelinck, R.F.H.M.; Rosielle, P.C.J.N.; Steinbuch, M.

    2009-01-01

    Adaptive Optics is established as essential technology in current and future ground based (extremely) large telescopes to compensate for atmospheric turbulence. Deformable mirrors for astronomic purposes have a high number of actuators (> 10k), a relatively large stroke (> 10µm) on a small spacing

  17. Hi-speed compact deformable mirror: status, applications, and perspectives

    Science.gov (United States)

    Rooms, F.; Camet, S.; Curis, J.-F.

    2010-02-01

    Membrane deformable mirrors based on magnetic actuators have been known for years. State-of-the-art deformable mirrors usually have large strokes but low bandwidth. Furthermore, this bandwidth decreases with the diameter. In this paper, we present the results of a new actuator principle based on magnetic forces allowing high bandwidth (up to a few kHz), very large stroke (>30μm) with a record pitch of 1.5mm. The benefits of this technology will be presented for three applications: astronomy, vision science and microscopy. The parameters of the mirrors have been tuned such that the inter-actuator stroke of the deformable (more than 2.0μm) in order to fit the atmosphere turbulence characteristics. In vision science, efforts have been made to correct both simultaneously the low and high order aberrations (more than 45μm of wavefront correction on astigmatism and focus). Finally, we will demonstrate how we have developed a deformable mirror able to correct spherical aberrations (microscopy). The last part of the article is devoted to give some perspectives about this technology.

  18. Surface Slope Metrology on Deformable Soft X-ray Mirrors

    International Nuclear Information System (INIS)

    Yuan, Sheng; Yashchuk, Valeriy V.; Goldberg, Kenneth A.; Celestre, Rich; Church, Matthew; McKinney, Wayne R.; Morrison, Greg; Warwick, Tony

    2010-01-01

    We report on the current state of surface slope metrology on deformable mirrors for soft x-rays at the Advanced Light Source (ALS). While we are developing techniques for in situ at-wavelength tuning, we are refining methods of ex situ visible-light optical metrology to achieve sub-100-nrad accuracy. This paper reports on laboratory studies, measurements and tuning of a deformable test-KB mirror prior to its use. The test mirror was bent to a much different optical configuration than its original design, achieving a 0.38 micro-radian residual slope error. Modeling shows that in some cases, by including the image conjugate distance as an additional free parameter in the alignment, along with the two force couples, fourth-order tangential shape errors (the so-called bird shape) can be reduced or eliminated.

  19. Surface Slope Metrology on Deformable Soft X-ray Mirrors

    International Nuclear Information System (INIS)

    Yuan, S.; Yashchuk, V.V.; Goldberg, K.A.; Celestre, R.; Church, M.; McKinney, W.R.; Morrison, G.; Warwick, T.

    2009-01-01

    We report on the current state of surface slope metrology on deformable mirrors for soft x-rays at the Advanced Light Source (ALS). While we are developing techniques for in situ at-wavelength tuning, we are refining methods of ex situvisible-light optical metrology to achieve sub-100-nrad accuracy. This paper reports on laboratory studies, measurements and tuning of a deformable test-KB mirror prior to its use. The test mirror was bent to a much different optical configuration than its original design, achieving a 0.38 micro-radian residual slope error. Modeling shows that in some cases, by including the image conjugate distance as an additional free parameter in the alignment, along with the two force couples, fourth-order tangential shape errors (the so-called bird shape) can be reduced or eliminated.

  20. Application of MEMS Accelerometers and Gyroscopes in Fast Steering Mirror Control Systems

    Directory of Open Access Journals (Sweden)

    Jing Tian

    2016-03-01

    Full Text Available In a charge-coupled device (CCD-based fast steering mirror (FSM tracking control system, high control bandwidth is the most effective way to enhance the closed-loop performance. However, the control system usually suffers a great deal from mechanical resonances and time delays induced by the low sampling rate of CCDs. To meet the requirements of high precision and load restriction, fiber-optic gyroscopes (FOGs are usually used in traditional FSM tracking control systems. In recent years, the MEMS accelerometer and gyroscope are becoming smaller and lighter and their performance have improved gradually, so that they can be used in a fast steering mirror (FSM to realize the stabilization of the line-of-sight (LOS of the control system. Therefore, a tentative approach to implement a CCD-based FSM tracking control system, which uses MEMS accelerometers and gyroscopes as feedback components and contains an acceleration loop, a velocity loop and a position loop, is proposed. The disturbance suppression of the proposed method is the product of the error attenuation of the acceleration loop, the velocity loop and the position loop. Extensive experimental results show that the MEMS accelerometers and gyroscopes can act the similar role as the FOG with lower cost for stabilizing the LOS of the FSM tracking control system.

  1. Enhanced Fabrication Processes Development for High Actuator Count Deformable Mirrors, Phase II

    Data.gov (United States)

    National Aeronautics and Space Administration — We propose to design and fabricate a MEMS micromirror array consisting of 1021 ultra-flat, close-packed hexagonal mirror elements, each capable of 6mrad of tip and...

  2. Ultraflat Tip-Tilt-Piston MEMS Deformable Mirror, Phase II

    Data.gov (United States)

    National Aeronautics and Space Administration — This proposal describes a Phase II SBIR project to develop high-resolution, ultraflat micromirror array devices using advanced silicon surface micromachining...

  3. Ultra-compact imaging plate scanner module using a MEMS mirror and specially designed MPPC

    Science.gov (United States)

    Miyamoto, Yuichi; Sasaki, Kensuke; Takasaka, Masaomi; Fujimoto, Masatoshi; Yamamoto, Koei

    2017-02-01

    Computed radiography (CR), which is one of the most useful methods for dental imaging and nondestructive testing, uses a phosphor imaging plate (IP) because it is flexible, reusable, and inexpensive. Conventional IP scanners utilize a galvanometer or a polygon mirror as a scanning device and a photomultiplier as an optical sensor. Microelectromechanical systems (MEMS) technology currently provides silicon-based devices and has the potential to replace such discrete devices and sensors. Using these devices, we constructed an ultra-compact IP scanner. Our extremely compact plate scanner utilizes a module that is composed of a one-dimensional MEMS mirror and a long multi-pixel photon counter (MPPC) that is combined with a specially designed wavelength filter and a rod lens. The MEMS mirror, which is a non-resonant electromagnetic type, is 2.6 mm in diameter with a recommended optical scanning angle up to +/-15°. The CR's wide dynamic range is maintained using a newly developed MPPC. The MPPC is a sort of silicon photomultiplier and is a high-sensitivity photon-counting device. To achieve such a wide dynamic range, we developed a long MPPC that has over 10,000 pixels. For size reduction and high optical efficiency, we set the MPPC close to an IP across the rod lens. To prevent the MPPC from detecting excitation light, which is much more intense than photo-stimulated light, we produced a sharp-cut wavelength filter that has a wide angle (+/-60°) of tolerance. We evaluated our constructed scanner module through gray chart and resolution chart images.

  4. Modeling for deformable mirrors and the adaptive optics optimization program

    International Nuclear Information System (INIS)

    Henesian, M.A.; Haney, S.W.; Trenholme, J.B.; Thomas, M.

    1997-01-01

    We discuss aspects of adaptive optics optimization for large fusion laser systems such as the 192-arm National Ignition Facility (NIF) at LLNL. By way of example, we considered the discrete actuator deformable mirror and Hartmann sensor system used on the Beamlet laser. Beamlet is a single-aperture prototype of the 11-0-5 slab amplifier design for NIF, and so we expect similar optical distortion levels and deformable mirror correction requirements. We are now in the process of developing a numerically efficient object oriented C++ language implementation of our adaptive optics and wavefront sensor code, but this code is not yet operational. Results are based instead on the prototype algorithms, coded-up in an interpreted array processing computer language

  5. Optical calibration and test of the VLT Deformable Secondary Mirror

    Science.gov (United States)

    Briguglio, Runa; Xompero, Marco; Riccardi, Armando; Andrighettoni, Mario; Pescoller, Dietrich; Biasi, Roberto; Gallieni, Daniele; Vernet, Elise; Kolb, Johann; Arsenault, Robin; Madec, Pierre-Yves

    2013-12-01

    The Deformable Secondary Mirror (DSM) for the VLT (ESO) represents the state-of-art of the large-format deformable mirror technology with its 1170 voice-coil actuators and its internal metrology based on actuator co-located capacitive sensors to control the shape of the 1.12m-diameter 2mm-thick convex shell. The present paper reports the results of the optical characterization of the mirror unit with the ASSIST facility located at ESO-Garching and executed in a collaborative effort by ESO, INAF-Osservatorio Astrofisico di Arcetri and the DSM manufacturing companies (Microgate s.r.l. and A.D.S. International s.r.l.). The main purposes of the tests are the optical characterization of the shell flattening residuals, the corresponding calibration of flattening commands, the optical calibration of the capacitive sensors and the optical calibration of the mirror influence functions. The results are used for the optical acceptance of the DSM and to allow the next test phase coupling the DSM with the wave-front sensor modules of the new Adaptive Optics Facility (AOF) of ESO.

  6. The digital geometric phase technique applied to the deformation evaluation of MEMS devices

    International Nuclear Information System (INIS)

    Liu, Z W; Xie, H M; Gu, C Z; Meng, Y G

    2009-01-01

    Quantitative evaluation of the structure deformation of microfabricated electromechanical systems is of importance for the design and functional control of microsystems. In this investigation, a novel digital geometric phase technique was developed to meet the deformation evaluation requirement of microelectromechanical systems (MEMS). The technique is performed on the basis of regular artificial lattices, instead of a natural atom lattice. The regular artificial lattices with a pitch ranging from micrometer to nanometer will be directly fabricated on the measured surface of MEMS devices by using a focused ion beam (FIB). Phase information can be obtained from the Bragg filtered images after fast Fourier transform (FFT) and inverse fast Fourier transform (IFFT) of the scanning electronic microscope (SEM) images. Then the in-plane displacement field and the local strain field related to the phase information will be evaluated. The obtained results show that the technique can be well applied to deformation measurement with nanometer sensitivity and stiction force estimation of a MEMS device

  7. Modeling of electro-statically actuated two-axis (tip-tilt) MEMS torsion micro-mirrors for laser beamsteering

    Science.gov (United States)

    Edwards, C. L.; Boone, B. G.; Levine, W. S.; Davis, C. C.

    2007-04-01

    The availability of recently developed MEMS micro-mirror technology provides an opportunity to replace macro-scale actuators for free-space laser beamsteering in lidar and communication systems. Such an approach is under investigation at the Johns Hopkins University Applied Physics Laboratory for use on space-based platforms. Precision modeling of mirror pointing and its dynamics are critical to optimal design and control of MEMS beamsteerers. Beginning with Hornbeck's torque approach, this paper presents a first-principle, analytically closed-form torque model for an electro-statically actuated two-axis (tip-tilt) MEMS structure. An Euler dynamic equation formulation describes the gimbaled motion as a coupled pair of damped harmonic oscillators with a common forcing function. Static physical parameters such as MEMS mirror dimensions, facet mass, and height are inputs to the model as well as dynamic harmonic oscillator parameters such as damping and restoring constants fitted from measurements. A Taylor series expansion of the torque function provides valuable insights into basic one dimensional as well as two dimensional MEMS behavior, including operational sensitivities near "pull-in." The model also permits the natural inclusion and analysis of pointing noise sources such as electrical drive noise, platform vibration, and molecular Brownian motion. MATLAB and SIMULINK simulations illustrate performance sensitivities, controllability, and physical limitations, important considerations in the design of optimal pointing systems.

  8. Laser beam-forming by deformable mirror for laser isotope separation

    International Nuclear Information System (INIS)

    Nemoto, Koshichi; Fujii, Takashi; Goto, Naohiko

    1995-01-01

    A rectangular laser beam of uniform intensity is very suitable for laser isotope separation. In this paper, we propose a beam-forming system which consists two deformable mirrors. One of the mirrors changes the beam intensity and the other compensates for phase distortion. We developed a deformable mirror for beam-forming. Its deformed surface is similar to the ideal mirror surface for beam-forming. We reshaped a Gaussian-like He-Ne laser beam into a beam with a more uniform intensity profile by a simple deformable mirror. (author)

  9. A Virtual Pivot Point MEMS Actuator with Externally Mounted Mirror: Design, Fabrication and Characterization

    Directory of Open Access Journals (Sweden)

    T. M. Fahim AMIN

    2014-12-01

    Full Text Available In this paper, the design, fabrication, and characterization of a virtual pivot point micro electromechanical systems (MEMS electrostatic actuator with externally mounted mirror is presented. The point of rotation of the movable arm of the actuator is distant from the physical actuator. This is a requirement for certain applications, such as an external cavity laser in Littman configuration. A maximum rotational radius of 5 mm from the virtual pivot point was achieved. A detailed analytical analysis for the displacement of the structure is presented. The dynamic characterization of the device with a finite element analysis simulation shows that the resonance frequency of the in-plane rotational mode is well separated from that of the out-of-plane bending mode, confirming high in-plane stability. The devices were fabricated on a silicon-on-insulator wafer with device layer thickness of 100 µm. Thin mirrors were fabricated by dicing a 100 µm thick silicon wafer. A resonance frequency of about 5.9 ´ 102 Hz for the maximum sized mounted mirror (1.7 mm ´ 100 µm ´ 1.0 mm was determined by optical characterization.

  10. X-ray beam-shaping via deformable mirrors: Analytical computation of the required mirror profile

    International Nuclear Information System (INIS)

    Spiga, Daniele; Raimondi, Lorenzo; Svetina, Cristian; Zangrando, Marco

    2013-01-01

    X-ray mirrors with high focusing performances are in use in both mirror modules for X-ray telescopes and in synchrotron and FEL (Free Electron Laser) beamlines. A degradation of the focus sharpness arises in general from geometrical deformations and surface roughness, the former usually described by geometrical optics and the latter by physical optics. In general, technological developments are aimed at a very tight focusing, which requires the mirror profile to comply with the nominal shape as much as possible and to keep the roughness at a negligible level. However, a deliberate deformation of the mirror can be made to endow the focus with a desired size and distribution, via piezo actuators as done at the EIS-TIMEX beamline of FERMI@Elettra. The resulting profile can be characterized with a Long Trace Profilometer and correlated with the expected optical quality via a wavefront propagation code. However, if the roughness contribution can be neglected, the computation can be performed via a ray-tracing routine, and, under opportune assumptions, the focal spot profile (the Point Spread Function, PSF) can even be predicted analytically. The advantage of this approach is that the analytical relation can be reversed; i.e., from the desired PSF the required mirror profile can be computed easily, thereby avoiding the use of complex and time-consuming numerical codes. The method can also be suited in the case of spatially inhomogeneous beam intensities, as commonly experienced at synchrotrons and FELs. In this work we expose the analytical method and the application to the beam shaping problem

  11. Handheld ultrahigh speed swept source optical coherence tomography instrument using a MEMS scanning mirror.

    Science.gov (United States)

    Lu, Chen D; Kraus, Martin F; Potsaid, Benjamin; Liu, Jonathan J; Choi, Woojhon; Jayaraman, Vijaysekhar; Cable, Alex E; Hornegger, Joachim; Duker, Jay S; Fujimoto, James G

    2013-12-20

    We developed an ultrahigh speed, handheld swept source optical coherence tomography (SS-OCT) ophthalmic instrument using a 2D MEMS mirror. A vertical cavity surface-emitting laser (VCSEL) operating at 1060 nm center wavelength yielded a 350 kHz axial scan rate and 10 µm axial resolution in tissue. The long coherence length of the VCSEL enabled a 3.08 mm imaging range with minimal sensitivity roll-off in tissue. Two different designs with identical optical components were tested to evaluate handheld OCT ergonomics. An iris camera aided in alignment of the OCT beam through the pupil and a manual fixation light selected the imaging region on the retina. Volumetric and high definition scans were obtained from 5 undilated normal subjects. Volumetric OCT data was acquired by scanning the 2.4 mm diameter 2D MEMS mirror sinusoidally in the fast direction and linearly in the orthogonal slow direction. A second volumetric sinusoidal scan was obtained in the orthogonal direction and the two volumes were processed with a software algorithm to generate a merged motion-corrected volume. Motion-corrected standard 6 x 6 mm(2) and wide field 10 x 10 mm(2) volumetric OCT data were generated using two volumetric scans, each obtained in 1.4 seconds. High definition 10 mm and 6 mm B-scans were obtained by averaging and registering 25 B-scans obtained over the same position in 0.57 seconds. One of the advantages of volumetric OCT data is the generation of en face OCT images with arbitrary cross sectional B-scans registered to fundus features. This technology should enable screening applications to identify early retinal disease, before irreversible vision impairment or loss occurs. Handheld OCT technology also promises to enable applications in a wide range of settings outside of the traditional ophthalmology or optometry clinics including pediatrics, intraoperative, primary care, developing countries, and military medicine.

  12. 1015 PTT Segment MEMS DM Development, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — Microelectromechanical systems (MEMS) technology has the potential to create deformable mirrors (DM) with more than 10^4 actuators with size, weight, and power...

  13. Picometer-Resolution MEMS Segmented DM, Phase II

    Data.gov (United States)

    National Aeronautics and Space Administration — Microelectromechanical systems (MEMS) technology has the potential to create deformable mirrors (DM) with 10^4 actuators that have size, weight, and power...

  14. Picometer-Resolution MEMS Segmented DM, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — Microelectromechanical systems (MEMS) technology has the potential to create deformable mirrors (DM) with 10^4 actuators that have size, weight, and power...

  15. Cell Deformation in Cancer Metastasis: a BioMEMS Based Approach

    Energy Technology Data Exchange (ETDEWEB)

    Manimaran, M [Department of Medical Devices, Institute of Bioengineering and Nanotechnology (IBN) - A-STAR, 31 Biopolis Way, Nanos 04-01, Singapore 138669 (Singapore); Tay, Francis E H [Department of Medical Devices, Institute of Bioengineering and Nanotechnology (IBN) - A-STAR, 31 Biopolis Way, Nanos 04-01, Singapore 138669 (Singapore); NUS - Department of Mechanical Engineering, Singapore 117576., Department of Medical Devices, Institute of Bioengineering and Nanotechnology, 31 Biopolis way, 04-01 Nanos, Singapore 138669 (Singapore); Chaw, K C [Department of Medical Devices, Institute of Bioengineering and Nanotechnology (IBN) - A-STAR, 31 Biopolis Way, Nanos 04-01, Singapore 138669 (Singapore)

    2006-04-01

    Here we report a BioMEMS based microfluidic device as a deformation assay to study the deformability and growth capability of cells through microgaps. The micro-gaps are ranging from 3{mu}m to 30{mu}m with three microchannels parallel to each other to mimic the blood vessel bio-microenvironment. Flow conditions in the device can be controlled to have an environment as similar to that in vivo as possible. We used osteoblast cells with approximate size of 30 {mu}m as a model cell to study the deformation ability of this cell to migrate through the 3 {mu}m gap. Such a device enabled us, for the first time to measure the cell deformation with ease. More importantly, we are able to observe the cellular responses to gaps present in the device and understand the mechanics behind the morphological change of the cells.

  16. Design of control system for piezoelectric deformable mirror based on fuzzy self-adaptive PID control

    Science.gov (United States)

    Xiao, Nan; Gao, Wei; Song, Zongxi

    2017-10-01

    With the rapid development of adaptive optics technology, it is widely used in the fields of astronomical telescope imaging, laser beam shaping, optical communication and so on. As the key component of adaptive optics systems, the deformable mirror plays a role in wavefront correction. In order to achieve the high speed and high precision of deformable mirror system tracking control, it is necessary to find out the influence of each link on the system performance to model the system and design the controller. This paper presents a method about the piezoelectric deformable mirror driving control system.

  17. CubeSat Deformable Mirror Demonstration mission (DeMi)

    Science.gov (United States)

    Cahoy, K.; Marinan, A.; Kerr, C.; Novak, B.; Webber, M.; Kasdin, N. J.

    The high contrast requirement of 1010 needed to directly image an Earth-like exoplanet around a sun-like star at optical wavelengths requires space telescopes equipped with coronagraphs and wavefront control systems. Coronagraphs are needed to block the parent star's light and improve the ability of the system to detect photons that have reflected off of the exoplanet toward the observer. Wavefront control systems are needed to correct image plane aberrations and speckles caused by imperfections, thermal distortions, and diffraction in the telescope and optics that would otherwise corrupt the wavefront and ruin the desired contrast. The two key elements of wavefront control systems are (1) a way to detect the wavefront distortions (a wavefront sensor) and (2) a way to correct the distortions before the image plane (such as deformable mirrors, or DMs). In this paper, we investigate a compact and inexpensive CubeSat-based wavefront control testbed that can be used as a technology development precursor toward a larger mission.

  18. VLT deformable secondary mirror: integration and electromechanical tests results

    Science.gov (United States)

    Biasi, R.; Andrighettoni, M.; Angerer, G.; Mair, C.; Pescoller, D.; Lazzarini, P.; Anaclerio, E.; Mantegazza, M.; Gallieni, D.; Vernet, E.; Arsenault, R.; Madec, P.-Y.; Duhoux, P.; Riccardi, A.; Xompero, M.; Briguglio, R.; Manetti, M.; Morandini, M.

    2012-07-01

    The VLT Deformable secondary is planned to be installed on the VLT UT#4 as part of the telescope conversion into the Adaptive Optics test Facility (AOF). The adaptive unit is based on the well proven contactless, voice coil motor technology that has been already successfully implemented in the MMT, LBT and Magellan adaptive secondaries, and is considered a promising technical choice for the forthcoming ELT-generation adaptive correctors, like the E-ELT M4 and the GMT ASM. The VLT adaptive unit has been recently assembled after the completion of the manufacturing and modular test phases. In this paper, we present the most relevant aspects of the system integration and report the preliminary results of the electromechanical tests performed on the unit. This test campaign is a typical major step foreseen in all similar systems built so far: thanks to the metrology embedded in the system, that allows generating time-dependent stimuli and recording in real time the position of the controlled mirror on all actuators, typical dynamic response quality parameters like modal settling time, overshoot and following error can be acquired without employing optical measurements. In this way the system dynamic and some aspect of its thermal and long term stability can be fully characterized before starting the optical tests and calibrations.

  19. Fabrication Process and Electronics Development for Scaling Segmented MEMS DMs, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — Microelectromechanical systems (MEMS) technology has the potential to create deformable mirrors (DM) with more than 10^4 actuators that have size, weight, and power...

  20. Fabrication Process and Electronics Development for Scaling Segmented MEMS DMs, Phase II

    Data.gov (United States)

    National Aeronautics and Space Administration — Microelectromechanical systems (MEMS) technology has the potential to create deformable mirrors (DM) with more than 10^4 actuators that have size, weight, and power...

  1. Control Demonstration of a Thin Deformable In-Plane Actuated Mirror

    National Research Council Canada - National Science Library

    Peterson, Gina A

    2006-01-01

    .... The primary goal of this research is to demonstrate that an in-plane actuated membrane-like deformable optical mirror can be controlled to optical wavelength tolerances in a closed-loop system...

  2. Compact Low-Power Driver for Deformable Mirror Systems, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — Boston Micromachines Corporation (BMC), a leading developer of unique, high-resolution micromachined deformable mirrors (DMs), will develop a compact, low-power,...

  3. Design of an optimized adaptive optics system with a photo-controlled deformable mirror

    Czech Academy of Sciences Publication Activity Database

    Pilař, Jan; Bonora, Stefano; Lucianetti, Antonio; Jelínková, H.; Mocek, Tomáš

    2016-01-01

    Roč. 28, č. 13 (2016), s. 1422-1425 ISSN 1041-1135 Institutional support: RVO:68378271 Keywords : adaptive optics * closed loop systems * deformable mirror Subject RIV: BH - Optics, Masers, Lasers Impact factor: 2.375, year: 2016

  4. An innovative and efficient method to control the shape of push-pull membrane deformable mirror

    NARCIS (Netherlands)

    Polo, A.; Haber, A.; Pereira, S.F.; Verhaegen, M.H.G.; Urbach, H.P.

    2012-01-01

    We carry out performance characterisation of a commercial push and pull deformable mirror with 48 actuators (Adaptica Srl). We present a detailed description of the system as well as a statistical approach on the identification of the mirror influence function. A new efficient control algorithm to

  5. Modelling and optimization of a deformable mirror for laser beam control

    CSIR Research Space (South Africa)

    Loveday, PW

    2008-03-01

    Full Text Available for this application. The unimorph consists of a metallic disc, with a mirror finish, bonded to a piezoelectric disc. In adaptive optics the deformations that the mirror is required to perform are described by the Zernike polynomials, which are a complete set...

  6. A Piezoelectric Unimorph Deformable Mirror Concept by Wafer Transfer for Ultra Large Space Telescopes

    Science.gov (United States)

    Yang, Eui-Hyeok; Shcheglov, Kirill

    2002-01-01

    Future concepts of ultra large space telescopes include segmented silicon mirrors and inflatable polymer mirrors. Primary mirrors for these systems cannot meet optical surface figure requirements and are likely to generate over several microns of wavefront errors. In order to correct for these large wavefront errors, high stroke optical quality deformable mirrors are required. JPL has recently developed a new technology for transferring an entire wafer-level mirror membrane from one substrate to another. A thin membrane, 100 mm in diameter, has been successfully transferred without using adhesives or polymers. The measured peak-to-valley surface error of a transferred and patterned membrane (1 mm x 1 mm x 0.016 mm) is only 9 nm. The mirror element actuation principle is based on a piezoelectric unimorph. A voltage applied to the piezoelectric layer induces stress in the longitudinal direction causing the film to deform and pull on the mirror connected to it. The advantage of this approach is that the small longitudinal strains obtainable from a piezoelectric material at modest voltages are thus translated into large vertical displacements. Modeling is performed for a unimorph membrane consisting of clamped rectangular membrane with a PZT layer with variable dimensions. The membrane transfer technology is combined with the piezoelectric bimorph actuator concept to constitute a compact deformable mirror device with a large stroke actuation of a continuous mirror membrane, resulting in a compact A0 systems for use in ultra large space telescopes.

  7. Hybrid Electrostatic/Flextensional Deformable Membrane Mirror for Lightweight, Large Aperture and Cryogenic Space Telescopes, Phase II

    Data.gov (United States)

    National Aeronautics and Space Administration — TRS Technologies proposes innovative hybrid electrostatic/flextensional membrane deformable mirror capable of large amplitude aberration correction for large...

  8. Static and dynamic micro deformable mirror characterization by phase-shifting and time-averaged interferometry

    Science.gov (United States)

    Liotard, Arnaud; Zamkotsian, Frédéric

    2017-11-01

    The micro-opto-electro-mechanical systems (MOEMS), based on mature technologies of micro-electronics, are essential in the design of future astronomical instruments. One of these key-components is the microdeformable mirror for wave-front correction. Very challenging topics like search of exo-planets could greatly benefit from this technology. Design, realization and characterization of micro-Deformable Mirrors are under way at Laboratoire d'Astrophysique de Marseille (LAM) in collaboration with Laboratoire d'Analyse et d'Architecture des Systèmes (LAAS). In order to measure the surface shape and the deformation parameters during operation of these devices, a high-resolution Twyman-Green interferometer has been developed. Measurements have been done on a tiltable micro-mirror (170*100μm2) designed by LAM-LAAS and realized by an American foundry, and also on an OKO deformable mirror (15mm diameter). Static characterization is made by phase shifting interferometry and dynamic measurements have been made by quantitative time-averaged interferometry. The OKO mirror has an actuator stroke of 370+/-10nm for 150V applied and its resonant frequency is 1170+/-50 Hz, and the tiltable mirror has a rotation cut-off frequency of 31+/-3 kHz.

  9. Driver ASICs for Advanced Deformable Mirrors, Phase II

    Data.gov (United States)

    National Aeronautics and Space Administration — The overall goal of the SBIR program is to develop a new Application Specified Integrated Circuit (ASIC) driver to be used in driver electronics of a deformable...

  10. Characterization of low-mass deformable mirrors and ASIC drivers for high-contrast imaging

    Science.gov (United States)

    Mejia Prada, Camilo; Yao, Li; Wu, Yuqian; Roberts, Lewis C.; Shelton, Chris; Wu, Xingtao

    2017-09-01

    The development of compact, high performance Deformable Mirrors (DMs) is one of the most important technological challenges for high-contrast imaging on space missions. Microscale Inc. has fabricated and characterized piezoelectric stack actuator deformable mirrors (PZT-DMs) and Application-Specific Integrated Circuit (ASIC) drivers for direct integration. The DM-ASIC system is designed to eliminate almost all cables, enabling a very compact optical system with low mass and low power consumption. We report on the optical tests used to evaluate the performance of the DM and ASIC units. We also compare the results to the requirements for space-based high-contrast imaging of exoplanets.

  11. Numerical model of the influence function of deformable mirrors based on Bessel Fourier orthogonal functions

    International Nuclear Information System (INIS)

    Li Shun; Zhang Sijiong

    2014-01-01

    A numerical model is presented to simulate the influence function of deformable mirror actuators. The numerical model is formed by Bessel Fourier orthogonal functions, which are constituted of Bessel orthogonal functions and a Fourier basis. A detailed comparison is presented between the new Bessel Fourier model, the Zernike model, the Gaussian influence function and the modified Gaussian influence function. Numerical experiments indicate that the new numerical model is easy to use and more accurate compared with other numerical models. The new numerical model can be used for describing deformable mirror performances and numerical simulations of adaptive optics systems. (research papers)

  12. Measurement of Deformations by MEMS Arrays, Verified at Sub-millimetre Level Using Robotic Total Stations

    Directory of Open Access Journals (Sweden)

    Tomas Beran

    2014-06-01

    Full Text Available Measurement of sub-millimetre-level deformations of structures in the presence of ambienttemperature changes can be challenging. This paper describes the measurement of astructure moving due to temperature changes, using two ShapeAccelArray (SAAinstruments, and verified by a geodetic monitoring system. SAA is a geotechnicalinstrument often used for monitoring of displacements in soil. SAA uses micro-electro-mechanical system (MEMS sensors to measure tilt in the gravity field. The geodeticmonitoring system, which uses ALERT software, senses the displacements of targetsrelative to control points, using a robotic total station (RTS. The test setup consists of acentral four-metre free-standing steel tube with other steel tubes welded to most of itslength. The central tube is anchored in a concrete foundation. This composite “pole” isequipped with two SAAs as well as three geodetic prisms mounted on the top, in the middle,and in the foundation. The geodetic system uses multiple control targets mounted inconcrete foundations of nearby buildings, and at the base of the pole. Long-termobservations using two SAAs indicate that the pole is subject to deformations due to cyclicalambient temperature variations causing the pole to move by a few millimetres each day. Ina multiple-day experiment, it was possible to track this movement using SAA as well as theRTS system. This paper presents data comparing the measurements of the two instrumentsand provides a good example of the detection of two-dimensional movements of seeminglyrigid objects due to temperature changes.

  13. Optimization of electrode geometry and piezoelectric layer thickness of a deformable mirror

    Directory of Open Access Journals (Sweden)

    Nováková Kateřina

    2013-05-01

    Full Text Available Deformable mirrors are the most commonly used wavefront correctors in adaptive optics systems. Nowadays, many applications of adaptive optics to astronomical telescopes, high power laser systems, and similar fast response optical devices require large diameter deformable mirrors with a fast response time and high actuator stroke. In order to satisfy such requirements, deformable mirrors based on piezoelectric layer composite structures have become a subject of intense scientific research during last two decades. In this paper, we present an optimization of several geometric parameters of a deformable mirror that consists of a nickel reflective layer deposited on top of a thin lead zirconate titanate (PZT piezoelectric disk. Honeycomb structure of gold electrodes is deposited on the bottom of the PZT layer. The analysis of the optimal thickness ratio between the PZT and nickel layers is performed to get the maximum actuator stroke using the finite element method. The effect of inter-electrode distance on the actuator stroke and influence function is investigated. Applicability and manufacturing issues are discussed.

  14. Modeling and Control of Magnetic Fluid Deformable Mirrors for Adaptive Optics Systems

    CERN Document Server

    Wu, Zhizheng; Ben Amara, Foued

    2013-01-01

    Modeling and Control of Magnetic Fluid Deformable Mirrors for Adaptive Optics Systems presents a novel design of wavefront correctors based on magnetic fluid deformable mirrors (MFDM) as well as corresponding control algorithms. The presented wavefront correctors are characterized by their linear, dynamic response. Various mirror surface shape control algorithms are presented along with experimental evaluations of the performance of the resulting adaptive optics systems. Adaptive optics (AO) systems are used in various fields of application to enhance the performance of optical systems, such as imaging, laser, free space optical communication systems, etc. This book is intended for undergraduate and graduate students, professors, engineers, scientists and researchers working on the design of adaptive optics systems and their various emerging fields of application. Zhizheng Wu is an associate professor at Shanghai University, China. Azhar Iqbal is a research associate at the University of Toronto, Canada. Foue...

  15. Scalable stacked array piezoelectric deformable mirror for astronomy and laser processing applications

    Energy Technology Data Exchange (ETDEWEB)

    Wlodarczyk, Krystian L., E-mail: K.L.Wlodarczyk@hw.ac.uk; Maier, Robert R. J.; Hand, Duncan P. [Institute of Photonics and Quantum Sciences, Heriot-Watt University, Edinburgh EH14 4AS (United Kingdom); Bryce, Emma; Hutson, David; Kirk, Katherine [School of Engineering and Science, University of the West of Scotland, Paisley PA1 2BE (United Kingdom); Schwartz, Noah; Atkinson, David; Beard, Steven; Baillie, Tom; Parr-Burman, Phil [UK Astronomy Technology Centre, Royal Observatory, Edinburgh EH9 3HJ (United Kingdom); Strachan, Mel [Institute of Photonics and Quantum Sciences, Heriot-Watt University, Edinburgh EH14 4AS (United Kingdom); UK Astronomy Technology Centre, Royal Observatory, Edinburgh EH9 3HJ (United Kingdom)

    2014-02-15

    A prototype of a scalable and potentially low-cost stacked array piezoelectric deformable mirror (SA-PDM) with 35 active elements is presented in this paper. This prototype is characterized by a 2 μm maximum actuator stroke, a 1.4 μm mirror sag (measured for a 14 mm × 14 mm area of the unpowered SA-PDM), and a ±200 nm hysteresis error. The initial proof of concept experiments described here show that this mirror can be successfully used for shaping a high power laser beam in order to improve laser machining performance. Various beam shapes have been obtained with the SA-PDM and examples of laser machining with the shaped beams are presented.

  16. A novel 360-degree shape measurement using a simple setup with two mirrors and a laser MEMS scanner

    Science.gov (United States)

    Jin, Rui; Zhou, Xiang; Yang, Tao; Li, Dong; Wang, Chao

    2017-09-01

    There is no denying that 360-degree shape measurement technology plays an important role in the field of threedimensional optical metrology. Traditional optical 360-degree shape measurement methods are mainly two kinds: the first kind, by placing multiple scanners to achieve 360-degree measurements; the second kind, through the high-precision rotating device to get 360-degree shape model. The former increases the number of scanners and costly, while the latter using rotating devices lead to time consuming. This paper presents a low cost and fast optical 360-degree shape measurement method, which possesses the advantages of full static, fast and low cost. The measuring system consists of two mirrors with a certain angle, a laser projection system, a stereoscopic calibration block, and two cameras. And most of all, laser MEMS scanner can achieve precise movement of laser stripes without any movement mechanism, improving the measurement accuracy and efficiency. What's more, a novel stereo calibration technology presented in this paper can achieve point clouds data registration, and then get the 360-degree model of objects. A stereoscopic calibration block with special coded patterns on six sides is used in this novel stereo calibration method. Through this novel stereo calibration technology we can quickly get the 360-degree models of objects.

  17. Some studies on the deformation of the membrane in an RF MEMS switch

    NARCIS (Netherlands)

    Ambati, Vijaya Raghav; Asheim, Andreas; van den Berg, Jan Bouwe; van Gennip, Yves; Gerasimov, Tymofiy; Hlod, Andriy; Planqué, Bob; van der Schans, Martin; van der Stelt, Sjors; Vargas Rivera, Michelangelo; Vondenhoff, Erwin; Bokhove, Onno; Hurink, Johann; Meinsma, Gjerrit; Stolk, Chris; Vellekoop, Michel

    2008-01-01

    Radio Frequency (RF) switches of Micro Electro Mechanical Systems (MEMS) are appealing to the mobile industry because of their energy efficiency and ability to accommodate more frequency bands. However, the electromechanical coupling of the electrical circuit to the mechanical components in RF MEMS

  18. Mirroring

    DEFF Research Database (Denmark)

    Wegener, Charlotte; Wegener, Gregers

    2016-01-01

    and metaphorical value of mirroring for creativity theory across two different research fields — neuroscience and learning. We engage in a mutual (possibly creative) exploration of mirroring from ‘mirror neurons’ to mirroring in social learning theory. One of the most fascinating aspects of mirroring...... as a neurobiological and as a learning phenomenon is that it points to the embodied and unconscious aspects of social interaction. Thus, mirroring should not be reduced to the non-creative, mechanical repetition of the original, outstanding creativity. To mirror is a human capability built into our capacity to create......Most definitions of creativity emphasise originality. The creative product is recognised as distinct from other products and the creative person as someone who stands out from the crowd. What tend to be overlooked are acts of mirroring as a crucial element of the creative process. The human ability...

  19. Wavefront correction performed by a deformable mirror of arbitrary actuator pattern within a multireflection waveguide.

    Science.gov (United States)

    Ma, Xingkun; Huang, Lei; Bian, Qi; Gong, Mali

    2014-09-10

    The wavefront correction ability of a deformable mirror with a multireflection waveguide was investigated and compared via simulations. By dividing a conventional actuator array into a multireflection waveguide that consisted of single-actuator units, an arbitrary actuator pattern could be achieved. A stochastic parallel perturbation algorithm was proposed to find the optimal actuator pattern for a particular aberration. Compared with conventional an actuator array, the multireflection waveguide showed significant advantages in correction of higher order aberrations.

  20. Analysis and experimental investigation for collimator reflective mirror surface deformation adjustment

    Directory of Open Access Journals (Sweden)

    Chia-Yen Chan

    2017-01-01

    Full Text Available Collimator design is essential for meeting the requirements of high-precision telescopes. The collimator diameter should be larger than that of the target for alignment. Special supporting structures are required to reduce the gravitational deformation and control the surface deformation induced by the mounting force when inspecting large-aperture primary mirrors (M1. A ZERODURÂŽ mirror 620 mm in diameter for a collimator was analyzed using the finite element method to obtain the deformation induced by the supporting structures and adjustment mechanism. Zernike polynomials were also adopted to fit the optical surface and separate corresponding aberrations. The computed and measured wavefront aberration configurations for the collimator M1 were obtained complementally. The wavefront aberrations were adjusted using fine adjustment screws using 3D optical path differences map of the mirror surface. Through studies using different boundary conditions and inner ring support positions, it is concluded that the optical performance was excellent under a strong enough supporter. The best adjustment position was attained and applied to the actual collimator M1 to prove the correctness of the simulation results.

  1. Deformable mirror study. Final report, 21 July 1980-15 May 1981

    International Nuclear Information System (INIS)

    Budgor, A.B.

    1981-03-01

    The beam quality of a baseline system similar to the Helios system at Los Alamos Scientific Laboratory was analyzed with a two-dimensional beam train code based on a Fresnel propagator. The other components of the code include: (a) characterization of phase aberrations either in terms of Zernike polynomials synthesized directly from optical component interferograms when available, or by constructing a random wave front with specified statistics; (b) non-diffractive linear amplification via the Frantz-Nodvik equations; and (c) correction of accumulated phase aberration with continuous deformable mirrors whose surface is modeled by bicubic splines through the actuator points. The technical contents of this report will be presented in 4 sections. Section II will describe the physical optics of beam train propagation. A heuristic physical argument defining the zeroth order efficacy of adaptive optics to correct phase aberration is then derived. The results of applying the diffraction computer code to one beam line of the Helios laser system are described. The wave length scalability of deformable mirrors and efficacy of deformable mirror adaptive optics to correct phase aberration at UV wave lengths are then described

  2. Analysis of Non-Uniform Gain for Control of a Deformable Mirror in an Adaptive-Optics System

    National Research Council Canada - National Science Library

    Vitayaudom, Kevin P

    2008-01-01

    The objective of this research was to develop and experimentally verify the use of spatially varying gain maps on the servo-loop controller of a deformable mirror for improvements in the performance...

  3. MEMS scanner mirror based system for retina scanning and in eye projection

    Science.gov (United States)

    Woittennek, Franziska; Knobbe, Jens; Pügner, Tino; Dallmann, Hans-Georg; Schelinski, Uwe; Grüger, Heinrich

    2015-02-01

    Many applications could benefit from miniaturized systems to scan blood vessels behind the retina in the human eye, so called "retina scanning". This reaches from access control to sophisticated security applications and medical devices. High volume systems for consumer applications require low cost and a user friendly operation. For example this includes no need for removal of glasses and self-adjustment, in turn guidance of focus and point of attraction by simultaneous projection for the user. A new system has been designed based on the well-known resonantly driven 2-d scanner mirror of Fraunhofer IPMS. A combined NIR and VIS laser system illuminates the eye through an eye piece designed for an operating distance allowing the use of glasses and granting sufficient field of view. This usability feature was considered to be more important than highest miniaturization. The modulated VIS laser facilitates the projection of an image directly onto the retina. The backscattered light from the continuous NIR laser contains the information of the blood vessels and is detected by a highly sensitive photo diode. A demonstrational setup has been realized including readout and driving electronics. The laser power was adjusted to an eye-secure level. Additional security features were integrated. Test measurements revealed promising results. In a first demonstration application the detection of biometric pattern of the blood vessels was evaluated for issues authentication in.

  4. The deformable secondary mirror of VLT: final electro-mechanical and optical acceptance test results

    Science.gov (United States)

    Briguglio, Runa; Biasi, Roberto; Xompero, Marco; Riccardi, Armando; Andrighettoni, Mario; Pescoller, Dietrich; Angerer, Gerald; Gallieni, Daniele; Vernet, Elise; Kolb, Johann; Arsenault, Robin; Madec, Pierre-Yves

    2014-07-01

    The Deformable Secondary Mirror (DSM) for the VLT ended the stand-alone electro-mechanical and optical acceptance process, entering the test phase as part of the Adaptive Optics Facility (AOF) at the ESO Headquarter (Garching). The VLT-DSM currently represents the most advanced already-built large-format deformable mirror with its 1170 voice-coil actuators and its internal metrology based on co-located capacitive sensors to control the shape of the 1.12m-diameter 2mm-thick convex shell. The present paper reports the final results of the electro-mechanical and optical characterization of the DSM executed in a collaborative effort by the DSM manufacturing companies (Microgate s.r.l. and A.D.S. International s.r.l.), INAF-Osservatorio Astrofisico di Arcetri and ESO. The electro-mechanical acceptance tests have been performed in the company premises and their main purpose was the dynamical characterization of the internal control loop response and the calibration of the system data that are needed for its optimization. The optical acceptance tests have been performed at ESO (Garching) using the ASSIST optical test facility. The main purpose of the tests are the characterization of the optical shell flattening residuals, the corresponding calibration of flattening commands, the optical calibration of the capacitive sensors and the optical calibration of the mirror influence functions.

  5. Adaptive Optics System with Deformable Composite Mirror and High Speed, Ultra-Compact Electronics

    Science.gov (United States)

    Chen, Peter C.; Knowles, G. J.; Shea, B. G.

    2006-06-01

    We report development of a novel adaptive optics system for optical astronomy. Key components are very thin Deformable Mirrors (DM) made of fiber reinforced polymer resins, subminiature PMN-PT actuators, and low power, high bandwidth electronics drive system with compact packaging and minimal wiring. By using specific formulations of fibers, resins, and laminate construction, we are able to fabricate mirror face sheets that are thin (2 KHz. By utilizing QorTek’s proprietary synthetic impendence power supply technology, all the power, control, and signal extraction for many hundreds to 1000s of actuators and sensors can be implemented on a single matrix controller printed circuit board co-mounted with the DM. The matrix controller, in turn requires only a single serial bus interface, thereby obviating the need for massive wiring harnesses. The technology can be scaled up to multi-meter aperture DMs with >100K actuators.

  6. Modeling of a Micro-Electronic Mechanical Systems (MEMS) Deformable Mirror for Simulation and Characterization

    Science.gov (United States)

    2016-09-01

    quarter wave plates and the polarized beam splitter without being affected. These plates and beam splitter were part of the layout because the system in...1  II.  MODEL DESIGN ...of different methods for deposition, patterning, and etching until the desired design of the device is achieved. While a large number of devices

  7. Restraint deformation and corrosion protection of gold deposited aluminum mirrors for cold optics of mid-infrared instruments

    Science.gov (United States)

    Uchiyama, Mizuho; Miyata, Takashi; Sako, Shigeyuki; Kamizuka, Takafumi; Nakamura, Tomohiko; Asano, Kentaro; Okada, Kazushi; Onaka, Takashi; Sakon, Itsuki; Kataza, Hirokazu; Sarugaku, Yuki; Kirino, Okiharu; Nakagawa, Hiroyuki; Okada, Norio; Mitsui, Kenji

    2014-07-01

    We report the restraint deformation and the corrosion protection of gold deposited aluminum mirrors for mid-infrared instruments. To evaluate the deformation of the aluminum mirrors by thermal shrinkage, monitoring measurement of the surface of a mirror has been carried out in the cooling cycles from the room temperature to 100 K. The result showed that the effect of the deformation was reduced to one fourth if the mirror was screwed with spring washers. We have explored an effective way to prevent the mirror from being galvanically corroded. A number of samples have been prepared by changing the coating conditions, such as inserting an insulation layer, making a multi-layer and overcoating water blocking layer, or carrying out precision cleaning before coating. Precision cleaning before the deposition and protecting coat with SiO over the gold layer seemed to be effective in blocking corrosion of the aluminum. The SiO over-coated mirror has survived the cooling test for the mid-infrared use and approximately 1 percent decrease in the reflectance has been detected at 6-25 microns compared to gold deposited mirror without coating.

  8. Research on the Phase Aberration Correction with a Deformable Mirror Controlled by a Genetic Algorithm

    International Nuclear Information System (INIS)

    Yang, P; Hu, S J; Chen, S Q; Yang, W; Xu, B; Jiang, W H

    2006-01-01

    In order to improve laser beam quality, a real number encoding genetic algorithm based on adaptive optics technology was presented. This algorithm was applied to control a 19-channel deformable mirror to correct phase aberration in laser beam. It is known that when traditional adaptive optics system is used to correct laser beam wave-front phase aberration, a precondition is to measure the phase aberration information in the laser beam. However, using genetic algorithms, there is no necessary to know the phase aberration information in the laser beam beforehand. The only parameter need to know is the Light intensity behind the pinhole on the focal plane. This parameter was used as the fitness function for the genetic algorithm. Simulation results show that the optimal shape of the 19-channel deformable mirror applied to correct the phase aberration can be ascertained. The peak light intensity was improved by a factor of 21, and the encircled energy strehl ratio was increased to 0.34 from 0.02 as the phase aberration was corrected with this technique

  9. Optical MEMS for Earth observation

    Science.gov (United States)

    Liotard, Arnaud; Viard, Thierry; Noell, Wilfried; Zamkotsian, Frédéric; Freire, Marco; Guldimann, Benedikt; Kraft, Stefan

    2017-11-01

    Due to the relatively large number of optical Earth Observation missions at ESA, this area is interesting for new space technology developments. In addition to their compactness, scalability and specific task customization, optical MEMS could generate new functions not available with current technologies and are thus candidates for the design of future space instruments. Most mature components for space applications are the digital mirror arrays, the micro-deformable mirrors, the programmable micro diffraction gratings and tiltable micromirrors. A first selection of market-pull and techno-push concepts is done. In addition, some concepts are coming from outside Earth Observation. Finally two concepts are more deeply analyzed. The first concept is a programmable slit for straylight control for space spectro-imagers. This instrument is a push-broom spectroimager for which some images cannot be exploited because of bright sources in the field-of-view. The proposed concept consists in replacing the current entrance spectrometer slit by an active row of micro-mirrors. The MEMS will permit to dynamically remove the bright sources and then to obtain a field-of-view with an optically enhanced signal-to-noise ratio. The second concept is a push-broom imager for which the acquired spectrum can be tuned by optical MEMS. This system is composed of two diffractive elements and a digital mirror array. The first diffractive element spreads the spectrum. A micromirror array is set at the location of the spectral focal plane. By putting the micro-mirrors ON or OFF, we can select parts of field-of-view or spectrum. The second diffractive element then recombines the light on a push-broom detector. Dichroics filters, strip filter, band-pass filter could be replaced by a unique instrument.

  10. Reducing the Surface Performance Requirements of a Primary Mirror by Adding a Deformable Mirror in its Optical Path

    Science.gov (United States)

    2015-12-01

    data. Of note, the interferometer compensates for the double -pass induced by single reflections off a surface by diving all measurements by 2. However...the interferometer. Since the laser reflects off the CFRP mirror only once, the CFRP wavefront measurements did not require additional double -pass...conducted with a flat mirror in the optical path. Figure 13 presents the measured wavefront error of the CFRP mirror with piston , tip and tip removed and

  11. Control of a 45-cm long x-ray deformable mirror with either external or internal metrology

    Science.gov (United States)

    Poyneer, Lisa A.; Pardini, Tommaso; McCarville, Thomas; Palmer, David; Brooks, Audrey

    2014-09-01

    Our 45-cm long x-ray deformable mirror has 45 actuators along the tangential axis, along with one strain gauge per actuator and eight temperature sensors. We discuss the detailed calibration of the mirror's figure response to voltage (fourth-order) and the strain gauges' response to figure changes (linear). The mirror's cylinder shape changes with temperature, which can be tracked with the temperature sensors. We present initial results of measuring figure change with the strain gauges, which works very well for large changes (> 10 nm peak-to- valley), but is noisy with a single strain reading for small changes (5 nm peak-to-valley).

  12. RF MEMS

    Indian Academy of Sciences (India)

    At the bare die level the insertion loss, return loss and the isolation ... ing and packaging of a silicon on glass based RF MEMS switch fabricated using DRIE. ..... follows the power law based on the asperity deformation model given by Pattona & ... Surface mount style RF packages (SMX series 580465) from Startedge Corp.

  13. Real-time wavefront correction system using a zonal deformable mirror and a Hartmann sensor

    International Nuclear Information System (INIS)

    Salmon, J.T.; Bliss, E.S.; Long, T.W.; Orham, E.L.; Presta, R.W.; Swift, C.D.; Ward, R.S.

    1991-07-01

    We have developed an adaptive optics system that corrects up to five waves of 2nd-order and 3rd-order aberrations in a high-power laser beam to less than 1/10th wave RMS. The wavefront sensor is a Hartmann sensor with discrete lenses and position-sensitive photodiodes; the deformable mirror uses piezoelectric actuators with feedback from strain gauges bonded to the stacks. The controller hardware uses a VME bus. The system removes thermally induced aberrations generated in the master-oscillator-power-amplifier chains of a dye laser, as well as aberrations generated in beam combiners and vacuum isolation windows for average output powers exceeding 1 kW. The system bandwidth is 1 Hz, but higher bandwidths are easily attainable

  14. X-ray metrology and performance of a 45-cm long x-ray deformable mirror

    Energy Technology Data Exchange (ETDEWEB)

    Poyneer, Lisa A., E-mail: poyneer1@llnl.gov; Brejnholt, Nicolai F.; Hill, Randall; Jackson, Jessie; Hagler, Lisle [Lawrence Livermore National Laboratory, 7000 East Avenue, Livermore, California 94550 (United States); Celestre, Richard; Feng, Jun [Advanced Light Source, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720 (United States)

    2016-05-15

    We describe experiments with a 45-cm long x-ray deformable mirror (XDM) that have been conducted in End Station 2, Beamline 5.3.1 at the Advanced Light Source. A detailed description of the hardware implementation is provided. We explain our one-dimensional Fresnel propagation code that correctly handles grazing incidence and includes a model of the XDM. This code is used to simulate and verify experimental results. Initial long trace profiler metrology of the XDM at 7.5 keV is presented. The ability to measure a large (150-nm amplitude) height change on the XDM is demonstrated. The results agree well with the simulated experiment at an error level of 1 μrad RMS. Direct imaging of the x-ray beam also shows the expected change in intensity profile at the detector.

  15. Adaptive compensation of aberrations in ultrafast 3D microscopy using a deformable mirror

    Science.gov (United States)

    Sherman, Leah R.; Albert, O.; Schmidt, Christoph F.; Vdovin, Gleb V.; Mourou, Gerard A.; Norris, Theodore B.

    2000-05-01

    3D imaging using a multiphoton scanning confocal microscope is ultimately limited by aberrations of the system. We describe a system to adaptively compensate the aberrations with a deformable mirror. We have increased the transverse scanning range of the microscope by three with compensation of off-axis aberrations.We have also significantly increased the longitudinal scanning depth with compensation of spherical aberrations from the penetration into the sample. Our correction is based on a genetic algorithm that uses second harmonic or two-photon fluorescence signal excited by femtosecond pulses from the sample as the enhancement parameter. This allows us to globally optimize the wavefront without a wavefront measurement. To improve the speed of the optimization we use Zernike polynomials as the basis for correction. Corrections can be stored in a database for look-up with future samples.

  16. Hysteresis compensation of piezoelectric deformable mirror based on Prandtl-Ishlinskii model

    Science.gov (United States)

    Ma, Jianqiang; Tian, Lei; Li, Yan; Yang, Zongfeng; Cui, Yuguo; Chu, Jiaru

    2018-06-01

    Hysteresis of piezoelectric deformable mirror (DM) reduces the closed-loop bandwidth and the open-loop correction accuracy of adaptive optics (AO) systems. In this work, a classical Prandtl-Ishlinskii (PI) model is employed to model the hysteresis behavior of a unimorph DM with 20 actuators. A modified control algorithm combined with the inverse PI model is developed for piezoelectric DMs. With the help of PI model, the hysteresis of the DM was reduced effectively from about 9% to 1%. Furthermore, open-loop regenerations of low-order aberrations with or without hysteresis compensation were carried out. The experimental results demonstrate that the regeneration accuracy with PI model compensation is significantly improved.

  17. Relativistic deformed mean-field calculation of binding energy differences of mirror nuclei

    International Nuclear Information System (INIS)

    Koepf, W.; Barreiro, L.A.

    1996-01-01

    Binding energy differences of mirror nuclei for A=15, 17, 27, 29, 31, 33, 39 and 41 are calculated in the framework of relativistic deformed mean-field theory. The spatial components of the vector meson fields and the photon are fully taken into account in a self-consistent manner. The calculated binding energy differences are systematically smaller than the experimental values and lend support to the existence of the Okamoto-Nolen-Schiffer anomaly found decades ago in nonrelativistic calculations. For the majority of the nuclei studied, however, the results are such that the anomaly is significantly smaller than the one obtained within state-of-the-art nonrelativistic calculations. (author). 35 refs

  18. Experimental study and analytical model of deformation of magnetostrictive films as applied to mirrors for x-ray space telescopes.

    Science.gov (United States)

    Wang, Xiaoli; Knapp, Peter; Vaynman, S; Graham, M E; Cao, Jian; Ulmer, M P

    2014-09-20

    The desire for continuously gaining new knowledge in astronomy has pushed the frontier of engineering methods to deliver lighter, thinner, higher quality mirrors at an affordable cost for use in an x-ray observatory. To address these needs, we have been investigating the application of magnetic smart materials (MSMs) deposited as a thin film on mirror substrates. MSMs have some interesting properties that make the application of MSMs to mirror substrates a promising solution for making the next generation of x-ray telescopes. Due to the ability to hold a shape with an impressed permanent magnetic field, MSMs have the potential to be the method used to make light weight, affordable x-ray telescope mirrors. This paper presents the experimental setup for measuring the deformation of the magnetostrictive bimorph specimens under an applied magnetic field, and the analytical and numerical analysis of the deformation. As a first step in the development of tools to predict deflections, we deposited Terfenol-D on the glass substrates. We then made measurements that were compared with the results from the analytical and numerical analysis. The surface profiles of thin-film specimens were measured under an external magnetic field with white light interferometry (WLI). The analytical model provides good predictions of film deformation behavior under various magnetic field strengths. This work establishes a solid foundation for further research to analyze the full three-dimensional deformation behavior of magnetostrictive thin films.

  19. Simultaneous correction of large low-order and high-order aberrations with a new deformable mirror technology

    Science.gov (United States)

    Rooms, F.; Camet, S.; Curis, J. F.

    2010-02-01

    A new technology of deformable mirror will be presented. Based on magnetic actuators, these deformable mirrors feature record strokes (more than +/- 45μm of astigmatism and focus correction) with an optimized temporal behavior. Furthermore, the development has been made in order to have a large density of actuators within a small clear aperture (typically 52 actuators within a diameter of 9.0mm). We will present the key benefits of this technology for vision science: simultaneous correction of low and high order aberrations, AO-SLO image without artifacts due to the membrane vibration, optimized control, etc. Using recent papers published by Doble, Thibos and Miller, we show the performances that can be achieved by various configurations using statistical approach. The typical distribution of wavefront aberrations (both the low order aberration (LOA) and high order aberration (HOA)) have been computed and the correction applied by the mirror. We compare two configurations of deformable mirrors (52 and 97 actuators) and highlight the influence of the number of actuators on the fitting error, the photon noise error and the effective bandwidth of correction.

  20. Enantiomeric switching of chiral metamaterial for terahertz polarization modulation employing vertically deformable MEMS spirals

    Science.gov (United States)

    Kan, Tetsuo; Isozaki, Akihiro; Kanda, Natsuki; Nemoto, Natsuki; Konishi, Kuniaki; Takahashi, Hidetoshi; Kuwata-Gonokami, Makoto; Matsumoto, Kiyoshi; Shimoyama, Isao

    2015-10-01

    Active modulation of the polarization states of terahertz light is indispensable for polarization-sensitive spectroscopy, having important applications such as non-contact Hall measurements, vibrational circular dichroism measurements and anisotropy imaging. In the terahertz region, the lack of a polarization modulator similar to a photoelastic modulator in the visible range hampers expansion of such spectroscopy. A terahertz chiral metamaterial has a huge optical activity unavailable in nature; nevertheless, its modulation is still challenging. Here we demonstrate a handedness-switchable chiral metamaterial for polarization modulation employing vertically deformable Micro Electro Mechanical Systems. Vertical deformation of a planar spiral by a pneumatic force creates a three-dimensional spiral. Enantiomeric switching is realized by selecting the deformation direction, where the polarity of the optical activity is altered while maintaining the spectral shape. A polarization rotation as high as 28° is experimentally observed, thus providing a practical and compact polarization modulator for the terahertz range.

  1. A multi-electrode and pre-deformed bilayer spring structure electrostatic attractive MEMS actuator with large stroke at low actuation voltage

    International Nuclear Information System (INIS)

    Hu, Fangrong; Li, Zhi; Xiong, Xianming; Niu, Junhao; Peng, Zhiyong; Qian, Yixian; Yao, Jun

    2012-01-01

    This paper presents a multi-electrode and pre-deformed bilayer spring structure electrostatic attractive microelectromechanical systems (MEMS) actuator; it has large stroke at relatively low actuation voltage. Generally, electrostatic-attractive-force-based actuators have small stroke due to the instability resulted from the electrostatic ‘pull-in’ phenomenon. However, in many applications, the electrostatic micro-actuator with large stroke at low voltage is more preferred. By introducing a multi-electrode and a pre-deformed bilayer spring structure, an electrostatic attractive MEMS actuator with large stroke at very low actuation voltage has been successfully demonstrated in this paper. The actuator contains a central plate with a size of 300 µm × 300 µm × 1.5 µm and it is supported by four L-shaped bilayer springs which are pre-deformed due to residual stresses. Each bilayer spring is simultaneously attracted by three adjacent fixed electrodes, and the factors affecting the electrostatic attractive force are analyzed by a finite element analysis method. The prototype of the actuator is fabricated by poly-multi-user-MEMS-process (PolyMUMP) and the static performance is tested using a white light interferometer. The measured stroke of the actuator reaches 2 µm at 13 V dc, and it shows a good agreement with the simulation. (paper)

  2. Preparation and Characterization of Silver Liquid Thin Films for Magnetic Fluid Deformable Mirror

    Directory of Open Access Journals (Sweden)

    Lianchao Zhang

    2015-01-01

    Full Text Available Silver liquid thin film, formed by silver nanoparticles stacking and spreading on the surface of the liquid, is one of the important parts of magnetic fluid deformable mirror. First, silver nanoparticles were prepared by liquid phase chemical reduction method using sodium citrate as reducing agent and stabilizer and silver nitrate as precursor. Characterization of silver nanoparticles was studied using X-ray diffractometer, UV-vis spectrophotometer, and transmission electron microscope (TEM. The results showed that silver nanoparticles are spherical and have a good monodispersity. Additionally, the effect of the reaction conditions on the particle size of silver is obvious. And then silver liquid thin films were prepared by oil-water two-phase interface technology using as-synthesized silver nanoparticles. Properties of the film were investigated using different technology. The results showed that the film has good reflectivity and the particle size has a great influence on the reflectivity of the films. SEM photos showed that the liquid film is composed of multilayer silver nanoparticles. In addition, stability of the film was studied. The results showed that after being stored for 8 days under natural conditions, the gloss and reflectivity of the film start to decrease.

  3. A High-Performance Deformable Mirror with Integrated Driver ASIC for Space Based Active Optics

    Science.gov (United States)

    Shelton, Chris

    Direct imaging of exoplanets is key to fully understanding these systems through spectroscopy and astrometry. The primary impediment to direct imaging of exoplanets is the extremely high brightness ratio between the planet and its parent star. Direct imaging requires a technique for contrast suppression, which include coronagraphs, and nulling interferometers. Deformable mirrors (DMs) are essential to both of these techniques. With space missions in mind, Microscale is developing a novel DM with direct integration of DM and its electronic control functions in a single small envelope. The Application Specific Integrated Circuit (ASIC) is key to the shrinking of the electronic control functions to a size compatible with direct integration with the DM. Through a NASA SBIR project, Microscale, with JPL oversight, has successfully demonstrated a unique deformable mirror (DM) driver ASIC prototype based on an ultra-low power switch architecture. Microscale calls this the Switch-Mode ASIC, or SM-ASIC, and has characterized it for a key set of performance parameters, and has tested its operation with a variety of actuator loads, such as piezo stack and unimorph, and over a wide temperature range. These tests show the SM-ASIC's capability of supporting active optics in correcting aberrations of a telescope in space. Microscale has also developed DMs to go with the SM-ASIC driver. The latest DM version produced uses small piezo stack elements in an 8x8 array, bonded to a novel silicon facesheet structure fabricated monolithically into a polished mirror on one side and mechanical linkage posts that connect to the piezoelectric stack actuators on the other. In this Supporting Technology proposal we propose to further develop the ASIC-DM and have assembled a very capable team to do so. It will be led by JPL, which has considerable expertise with DMs used in Adaptive Optics systems, with high-contrast imaging systems for exoplanet missions, and with designing DM driver

  4. Next-Generation Deformable Mirrors for Astronomical Coronagraphy by Utilizing PMN-PT Single Crystal Stack Actuators in integration with Driver ASIC, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — This SBIR Phase I project aims to develop a new manufacturing approach for deformable mirrors (DMs) by batch fabricating the stack actuator array. The innovation...

  5. Large-scale membrane transfer process: its application to single-crystal-silicon continuous membrane deformable mirror

    International Nuclear Information System (INIS)

    Wu, Tong; Sasaki, Takashi; Hane, Kazuhiro; Akiyama, Masayuki

    2013-01-01

    This paper describes a large-scale membrane transfer process developed for the construction of large-scale membrane devices via the transfer of continuous single-crystal-silicon membranes from one substrate to another. This technique is applied for fabricating a large stroke deformable mirror. A bimorph spring array is used to generate a large air gap between the mirror membrane and the electrode. A 1.9 mm × 1.9 mm × 2 µm single-crystal-silicon membrane is successfully transferred to the electrode substrate by Au–Si eutectic bonding and the subsequent all-dry release process. This process provides an effective approach for transferring a free-standing large continuous single-crystal-silicon to a flexible suspension spring array with a large air gap. (paper)

  6. Influence of thermal deformation in cavity mirrors on beam propagation characteristics of high-power slab lasers

    Science.gov (United States)

    Wang, Zhen; Xiao, Longsheng; Wang, Wei; Wu, Chao; Tang, Xiahui

    2018-01-01

    Owing to their good diffusion cooling and low sensitivity to misalignment, slab-shape negative-branch unstable-waveguide resonators are widely used for high-power lasers in industry. As the output beam of the resonator is astigmatic, an external beam shaping system is required. However, the transverse dimension of the cavity mirrors in the resonator is large. For a long-time operation, the heating of cavity mirrors can be non-uniform. This results in micro-deformation and a change in the radius of curvature of the cavity mirrors, and leads to an output beam of an offset optical axis of the resonator. It was found that a change in the radius of curvature of 0.1% (1 mm) caused by thermal deformation generates a transverse displacement of 1.65 mm at the spatial filter of the external beam shaping system, and an output power loss of more than 80%. This can potentially burn out the spatial filter. In order to analyze the effect of the offset optical axis of the beam on the external optical path, we analyzed the transverse displacement and rotational misalignments of the spatial filter. For instance, if the transverse displacement was 0.3 mm, the loss in the output power was 9.6% and a sidelobe appeared in the unstable direction. If the angle of rotation was 5°, the loss in the output power was 2%, and the poles were in the direction of the waveguide. Based on these results, by adjusting the bending mirror, the deviation angle of the output beam of the resonator cavity was corrected, in order to obtain maximum output power and optimal beam quality. Finally, the propagation characteristics of the corrected output beam were analyzed.

  7. Correcting Surface Figure Error in Imaging Satellites Using a Deformable Mirror

    Science.gov (United States)

    2013-12-01

    Configuration for Collecting Influence Function Data ..................11 3. 4D Interferometer...24 3. Influence Function Using Interferometer ........................................25 4. Determining the Influence Matrix...10 Figure 12. Influence function configuration with flip mirror (from [6]). ..........................11 Figure 13. Interferometer

  8. Large aperture deformable mirror with a transferred single-crystal silicon membrane actuated using large-stroke PZT Unimorph Actuators

    Science.gov (United States)

    Hishinumat, Yoshikazu; Yang, Eui - Hyeok (EH)

    2005-01-01

    We have demonstrated a large aperture (50 mm x 50 mm) continuous membrane deformable mirror (DM) with a large-stroke piezoelectric unimorph actuator array. The DM consists of a continuous, large aperture, silicon membrane 'transferred' in its entirety onto a 20 x 20 piezoelectric unimorph actuator array. A PZT unimorph actuator, 2.5 mm in diameter with optimized PZT/Si thickness and design showed a deflection of 5.7 [m at 20V. An assembled DM showed an operating frequency bandwidth of 30 kHz and influence function of approximately 30%.

  9. Design of a Compact, Bimorph Deformable Mirror-Based Adaptive Optics Scanning Laser Ophthalmoscope.

    Science.gov (United States)

    He, Yi; Deng, Guohua; Wei, Ling; Li, Xiqi; Yang, Jinsheng; Shi, Guohua; Zhang, Yudong

    2016-01-01

    We have designed, constructed and tested an adaptive optics scanning laser ophthalmoscope (AOSLO) using a bimorph mirror. The simulated AOSLO system achieves diffraction-limited criterion through all the raster scanning fields (6.4 mm pupil, 3° × 3° on pupil). The bimorph mirror-based AOSLO corrected ocular aberrations in model eyes to less than 0.1 μm RMS wavefront error with a closed-loop bandwidth of a few Hz. Facilitated with a bimorph mirror at a stroke of ±15 μm with 35 elements and an aperture of 20 mm, the new AOSLO system has a size only half that of the first-generation AOSLO system. The significant increase in stroke allows for large ocular aberrations such as defocus in the range of ±600° and astigmatism in the range of ±200°, thereby fully exploiting the AO correcting capabilities for diseased human eyes in the future.

  10. Finite Element Analysis of High Heat Load Deformation and Mechanical Bending Correction of a Beamline Mirror for the APS Upgrade

    Science.gov (United States)

    Goldring, Nicholas

    The impending Advanced Photon Source Upgrade (APS-U) will introduce a hard x-ray source that is set to surpass the current APS in brightness and coherence by two to three orders of magnitude. To achieve this, the storage ring light source will be equipped with a multi-bend achromat (MBA) lattice. In order to fully exploit and preserve the integrity of new beams actualized by upgraded storage ring components, improved beamline optics must also be introduced. The design process of new optics for the APS-U and other fourth generation synchrotrons involves the challenge of accommodating unprecedented heat loads. This dissertation presents an ex-situ analysis of heat load deformation and the subsequent mechanical bending correction of a 400 mm long, grazing-incidence, H2O side-cooled, reflecting mirror subjected to x-ray beams produced by the APS-U undulator source. Bending correction is measured as the smallest rms slope error, sigmarms, that can be resolved over a given length of the heat deformed geometry due to mechanical bending. Values of sigmarms in the account for finish errors or other contributions to sigmarms beyond the scope of thermal deformation and elastic bending. The methodology of this research includes finite element analysis (FEA) employed conjointly with an analytical solution for mechanical bending deflection by means of an end couple. Additionally, the study will focus on two beam power density profiles predicted by the APS-U which were created using the software SRCalc. The profiles account for a 6 GeV electron beam with second moment widths of 0.058 and 0.011 mm in the x- and y- directions respectively; the electron beam is passed through a 4.8 m long, 28 mm period APS-U undulator which produces the x-ray beam incident at a 3 mrad grazing angle on the flat mirror surface for both cases. The first power density profile is the most extreme case created by the undulator at it's closest gap with a critical energy of 3 keV (k y=2.459); the second

  11. Control of thermal deformation in dielectric mirrors using mechanical design and atomic layer deposition.

    Science.gov (United States)

    Gabriel, Nicholas T; Kim, Sangho S; Talghader, Joseph J

    2009-07-01

    A mechanical design technique for optical coatings that simultaneously controls thermal deformation and optical reflectivity is reported. The method requires measurement of the refractive index and thermal stress of single films prior to the design. Atomic layer deposition was used for deposition because of the high repeatability of the film constants. An Al2O3/HfO2 distributed Bragg reflector was deposited with a predicted peak reflectivity of 87.9% at 542.4 nm and predicted edge deformation of -360 nm/K on a 10 cm silicon substrate. The measured peak reflectivity was 85.7% at 541.7 nm with an edge deformation of -346 nm/K.

  12. MEMS packaging

    CERN Document Server

    Hsu , Tai-Ran

    2004-01-01

    MEMS Packaging discusses the prevalent practices and enabling techniques in assembly, packaging and testing of microelectromechanical systems (MEMS). The entire spectrum of assembly, packaging and testing of MEMS and microsystems, from essential enabling technologies to applications in key industries of life sciences, telecommunications and aerospace engineering is covered. Other topics included are bonding and sealing of microcomponents, process flow of MEMS and microsystems packaging, automated microassembly, and testing and design for testing.The Institution of Engineering and Technology is

  13. X-ray beam-shaping via deformable mirrors: surface profile and point spread function computation for Gaussian beams using physical optics.

    Science.gov (United States)

    Spiga, D

    2018-01-01

    X-ray mirrors with high focusing performances are commonly used in different sectors of science, such as X-ray astronomy, medical imaging and synchrotron/free-electron laser beamlines. While deformations of the mirror profile may cause degradation of the focus sharpness, a deliberate deformation of the mirror can be made to endow the focus with a desired size and distribution, via piezo actuators. The resulting profile can be characterized with suitable metrology tools and correlated with the expected optical quality via a wavefront propagation code or, sometimes, predicted using geometric optics. In the latter case and for the special class of profile deformations with monotonically increasing derivative, i.e. concave upwards, the point spread function (PSF) can even be predicted analytically. Moreover, under these assumptions, the relation can also be reversed: from the desired PSF the required profile deformation can be computed analytically, avoiding the use of trial-and-error search codes. However, the computation has been so far limited to geometric optics, which entailed some limitations: for example, mirror diffraction effects and the size of the coherent X-ray source were not considered. In this paper, the beam-shaping formalism in the framework of physical optics is reviewed, in the limit of small light wavelengths and in the case of Gaussian intensity wavefronts. Some examples of shaped profiles are also shown, aiming at turning a Gaussian intensity distribution into a top-hat one, and checks of the shaping performances computing the at-wavelength PSF by means of the WISE code are made.

  14. Design and Fabrication of a Large-Stroke Deformable Mirror Using a Gear-Shape Ionic-Conductive Polymer Metal Composite

    Directory of Open Access Journals (Sweden)

    Guo-Dung John Su

    2012-08-01

    Full Text Available Conventional camera modules with image sensors manipulate the focus or zoom by moving lenses. Although motors, such as voice-coil motors, can move the lens sets precisely, large volume, high power consumption, and long moving time are critical issues for motor-type camera modules. A deformable mirror (DM provides a good opportunity to improve these issues. The DM is a reflective type optical component which can alter the optical power to focus the lights on the two dimensional optical image sensors. It can make the camera system operate rapidly. Ionic polymer metal composite (IPMC is a promising electro-actuated polymer material that can be used in micromachining devices because of its large deformation with low actuation voltage. We developed a convenient simulation model based on Young’s modulus and Poisson’s ratio. We divided an ion exchange polymer, also known as Nafion®, into two virtual layers in the simulation model: one was expansive and the other was contractive, caused by opposite constant surface forces on each surface of the elements. Therefore, the deformation for different IPMC shapes can be described more easily. A standard experiment of voltage vs. tip displacement was used to verify the proposed modeling. Finally, a gear shaped IPMC actuator was designed and tested. Optical power of the IPMC deformable mirror is experimentally demonstrated to be 17 diopters with two volts. The needed voltage was about two orders lower than conventional silicon deformable mirrors and about one order lower than the liquid lens.

  15. Wafer-level vacuum packaged resonant micro-scanning mirrors for compact laser projection displays

    Science.gov (United States)

    Hofmann, Ulrich; Oldsen, Marten; Quenzer, Hans-Joachim; Janes, Joachim; Heller, Martin; Weiss, Manfred; Fakas, Georgios; Ratzmann, Lars; Marchetti, Eleonora; D'Ascoli, Francesco; Melani, Massimiliano; Bacciarelli, Luca; Volpi, Emilio; Battini, Francesco; Mostardini, Luca; Sechi, Francesco; De Marinis, Marco; Wagner, Bernd

    2008-02-01

    Scanning laser projection using resonant actuated MEMS scanning mirrors is expected to overcome the current limitation of small display size of mobile devices like cell phones, digital cameras and PDAs. Recent progress in the development of compact modulated RGB laser sources enables to set up very small laser projection systems that become attractive not only for consumer products but also for automotive applications like head-up and dash-board displays. Within the last years continuous progress was made in increasing MEMS scanner performance. However, only little is reported on how mass-produceability of these devices and stable functionality even under harsh environmental conditions can be guaranteed. Automotive application requires stable MEMS scanner operation over a wide temperature range from -40° to +85°Celsius. Therefore, hermetic packaging of electrostatically actuated MEMS scanning mirrors becomes essential to protect the sensitive device against particle contamination and condensing moisture. This paper reports on design, fabrication and test of a resonant actuated two-dimensional micro scanning mirror that is hermetically sealed on wafer level. With resonant frequencies of 30kHz and 1kHz, an achievable Theta-D-product of 13mm.deg and low dynamic deformation <20nm RMS it targets Lissajous projection with SVGA-resolution. Inevitable reflexes at the vacuum package surface can be seperated from the projection field by permanent inclination of the micromirror.

  16. Influences of thermal deformation of cavity mirrors induced by high energy DF laser to beam quality under the simulated real physical circumstances

    Science.gov (United States)

    Deng, Shaoyong; Zhang, Shiqiang; He, Minbo; Zhang, Zheng; Guan, Xiaowei

    2017-05-01

    The positive-branch confocal unstable resonator with inhomogeneous gain medium was studied for the normal used high energy DF laser system. The fast changing process of the resonator's eigenmodes was coupled with the slow changing process of the thermal deformation of cavity mirrors. Influences of the thermal deformation of cavity mirrors to the outcoupled beam quality and transmission loss of high frequency components of high energy laser were computed. The simulations are done through programs compiled by MATLAB and GLAD software and the method of combination of finite elements and Fox-li iteration algorithm was used. Effects of thermal distortion, misaligned of cavity mirrors and inhomogeneous distribution of gain medium were introduced to simulate the real physical circumstances of laser cavity. The wavefront distribution and beam quality (including RMS of wavefront, power in the bucket, Strehl ratio, diffraction limit β, position of the beam spot center, spot size and intensity distribution in far-field ) of the distorted outcoupled beam were studied. The conclusions of the simulation agree with the experimental results. This work would supply references of wavefront correction range to the adaptive optics system of interior alleyway.

  17. Advanced MEMS systems for optical communication and imaging

    International Nuclear Information System (INIS)

    Horenstein, M N; Sumner, R; Freedman, D S; Datta, M; Kani, N; Miller, P; Stewart, J B; Cornelissen, S

    2011-01-01

    Optical communication and adaptive optics have emerged as two important uses of micro-electromechanical (MEMS) devices based on electrostatic actuation. Each application uses a mirror whose surface is altered by applying voltages of up to 300 V. Previous generations of adaptive-optic mirrors were large (∼1 m) and required the use of piezoelectric transducers. Beginning in the mid-1990s, a new class of small MEMS mirrors (∼1 cm) were developed. These mirrors are now a commercially available, mature technology. This paper describes three advanced applications of MEMS mirrors. The first is a mirror used for corona-graphic imaging, whereby an interferometric telescope blocks the direct light from a distant star so that nearby objects such as planets can be seen. We have developed a key component of the system: a 144-channel, fully-scalable, high-voltage multiplexer that reduces power consumption to only a few hundred milliwatts. In a second application, a MEMS mirror comprises part of a two-way optical communication system in which only one node emits a laser beam. The other node is passive, incorporating a retro-reflective, electrostatic MEMS mirror that digitally encodes the reflected beam. In a third application, the short (∼100-ns) pulses of a commercially-available laser rangefinder are returned by the MEMS mirror as a digital data stream. Suitable low-power drive systems comprise part of the system design.

  18. A 2-D MEMS scanning mirror based on dynamic mixed mode excitation of a piezoelectric PZT thin film S-shaped actuator.

    Science.gov (United States)

    Koh, Kah How; Kobayashi, Takeshi; Lee, Chengkuo

    2011-07-18

    A novel dynamic excitation of an S-shaped PZT piezoelectric actuator, which is conceptualized by having two superimposed AC voltages, is characterized in this paper through the evaluation of the 2-D scanning characteristics of an integrated silicon micromirror. The device is micromachined from a SOI wafer with a 5 μm thick Si device layer and multilayers of Pt/Ti/PZT//Pt/Ti deposited as electrode and actuation materials. A large mirror (1.65 mm x 2mm) and an S-shaped PZT actuator are formed after the backside release process. Three modes of operation are investigated: bending, torsional and mixed. The resonant frequencies obtained for bending and torsional modes are 27Hz and 70Hz respectively. The maximum measured optical deflection angles obtained at 3Vpp are ± 38.9° and ± 2.1° respectively for bending and torsional modes. Various 2-D Lissajous patterns are demonstrated by superimposing two ac sinusoidal electrical signals of different frequencies (27 Hz and 70 Hz) into one signal to be used to actuate the mirror.

  19. Cryogenic Active Mirrors

    Data.gov (United States)

    National Aeronautics and Space Administration — This effort seeks to develop active mirrors that can correct for thermally-induced figure deformations upon cooling from room-temperature at the time of manufacture,...

  20. Generation of a single hot spot by use of a deformable mirror and study of its propagation in an underdense plasma

    International Nuclear Information System (INIS)

    Wattellier, Benoit; Fuchs, Julien; Zou Jiping; Chanteloup, Jean-Christophe; Bandulet, Heidi; Michel, Pierre; Labaune, Christine; Depierreux, Sylvie; Kudryashov, Alexis; Aleksandrov, Alexander

    2003-01-01

    Adaptive optics systems offer the prospect of significantly increasing the capabilities of high-power laser focusability, which is currently limited by thermal distortions. Using novel wave-front measurement techniques that improve the stability of such systems and a downstream large-aperture deformable mirror that does not bear the usual limitations associated with precompensation, we have improved the focusability of a high-power (6x100-J, 1-ns) Nd:glass laser facility by a factor of 6. Measuring the wave front and the on-target focal spot at full power, we obtained after correction focal spots with a best Strehl ratio of 0.6. The pulse peak intensity could thus be increased to ∼2x10 16 W/cm 2 , a level beyond reach of the usual focal spot shaping techniques. We then used the near-diffraction-limited focal spots produced by this system to measure the laser-plasma coupling for a single, controlled filament of light and to underline the importance of the coupling among the numerous speckles within conventional multispeckled beams

  1. Hollow MEMS

    DEFF Research Database (Denmark)

    Larsen, Peter Emil

    Miniaturization of electro mechanical sensor systems to the micro range and beyond has shown impressive sensitivities measuring sample properties like mass, viscosity, acceleration, pressure and force just to name a few applications. In order to enable these kinds of measurements on liquid samples...... a hollow MEMS sensor has been designed, fabricated and tested. Combined density, viscosity, buoyant mass spectrometry and IR absorption spectroscopy are possible on liquid samples and micron sized suspended particles (e.g. single cells). Measurements are based on changes in the resonant behavior...... of these sensors. Optimization of the microfabrication process has led to a process yield of almost 100% .This is achieved despite the fact, that the process still offers a high degree of flexibility. By simple modifications the Sensor shape can be optimized for different size ranges and sensitivities...

  2. Monitoring of slope-instabilities and deformations with Micro-Electro-Mechanical-Systems (MEMS) in wireless ad-hoc Sensor Networks

    Science.gov (United States)

    Arnhardt, C.; Fernández-Steeger, T. M.; Azzam, R.

    2009-04-01

    In most mountainous regions, landslides represent a major threat to human life, properties and infrastructures. Nowadays existing landslide monitoring systems are often characterized by high efforts in terms of purchase, installation, maintenance, manpower and material. In addition (or because of this) only small areas or selective points of the endangered zone can be observed by the system. Therefore the improvement of existing and the development of new monitoring and warning systems are of high relevance. The joint project "Sensor based Landslide Early Warning Systems" (SLEWS) deals with the development of a prototypic Alarm- and Early Warning system (EWS) for different types of landslides using low-cost micro-sensors (MEMS) integrated in a wireless sensor network (WSN). Modern so called Ad-Hoc, Multi-Hop wireless sensor networks (WSN) are characterized by a self organizing and self-healing capacity of the system (autonomous systems). The network consists of numerous individual and own energy-supply operating sensor nodes, that can send data packages from their measuring devices (here: MEMS) over other nodes (Multi-Hop) to a collection point (gateway). The gateway provides the interface to central processing and data retrieval units (PC, Laptop or server) outside the network. In order to detect and monitor the different landslide processes (like fall, topple, spreading or sliding) 3D MEMS capacitive sensors made from single silicon crystals and glass were chosen to measure acceleration, tilting and altitude changes. Based on the so called MEMS (Micro-Electro-Mechanical Systems) technology, the sensors combine very small mechanical and electronic units, sensing elements and transducers on a small microchip. The mass production of such type of sensors allows low cost applications in different areas (like automobile industries, medicine, and automation technology). Apart from the small and so space saving size and the low costs another advantage is the energy

  3. Thermal effects on beryllium mirrors

    International Nuclear Information System (INIS)

    Weinswig, S.

    1989-01-01

    Beryllium is probably the most frequently used material for spaceborne system scan mirrors. Beryllium's properties include lightweightedness, high Young's modulus, high stiffness value, high resonance value. As an optical surface, beryllium is usually nickel plated in order to produce a higher quality surface. This process leads to the beryllium mirror acting like a bimetallic device. The mirror's deformation due to the bimetallic property can possibly degrade the performance of the associated optical system. As large space borne systems are designed and as temperature considerations become more crucial in the instruments, the concern about temporal deformation of the scan mirrors becomes a prime consideration. Therefore, two sets of tests have been conducted in order to ascertain the thermal effects on nickel plated beryllium mirrors. These tests are categorized. The purpose of this paper is to present the values of the bimetallic effect on typical nickel plated beryllium mirrors

  4. Micro-fabrication technology for piezoelectric film formation and its application to MEMS

    OpenAIRE

    一木, 正聡; 曹, 俊杰; 張, 麓〓; 王, 占杰; 前田, 龍太郎; Masaaki, ICHIKI; Jiunn Jye, TSAUR; Lulu, ZHANG; Zhang Jie, WANG; Ryutaro, MAEDA; 産業技術総合研究所; 産業技術総合研究所; 産業技術総合研究所; 東北大学; 産業技術総合研究所

    2005-01-01

    Technological problems for realization of Micro Electro-mechanical System (MEMS) are discussed and an introduction of smart materials (PZT) is encouraged. The film formation and micromaching technology are discussed in integration of PZT thin films into MEMS. Further developments are proposed on PZT micro sensors and actuators with special emphasis laid on exploration of new application fields of MEMS, such as scanning mirror. Internal stress is estimated and analyzed for the improvement of d...

  5. Geometry of mirror manifolds

    International Nuclear Information System (INIS)

    Aspinwall, P.S.; Luetken, C.A.

    1991-01-01

    We analyze the mirror manifold hypothesis in one and three dimensions using the simplest available representations of the N = 2 superconformal algebra. The symmetries of these tensor models can be divided out to give an explicit representation of the mirror, and we give a simple group theoretical algorithm for determining which symmetries should be used. We show that the mirror of a superconformal field theory does not always have a geometrical interpretation, but when it does, deformations of complex structure of one manifold are reflected in deformations of the Kaehler form of the mirror manifold, and we show how the large radius limit of a manifold corresponds to a large complex structure limit in the mirror manifold. The mirror of the Tian-Yau three generation model is constructed both as a conformal field theory and as an algebraic variety with Euler number six. The Hodge numbers of this manifolds are fixed, but the intersection numbes are highly ambiguous, presumably reflected a rich structure of multicritical points in the moduli space of the field theory. (orig.)

  6. Biomaterials for MEMS

    CERN Document Server

    Chiao, Mu

    2011-01-01

    This book serves as a guide for practicing engineers, researchers, and students interested in MEMS devices that use biomaterials and biomedical applications. It is also suitable for engineers and researchers interested in MEMS and its applications but who do not have the necessary background in biomaterials.Biomaterials for MEMS highlights important features and issues of biomaterials that have been used in MEMS and biomedical areas. Hence this book is an essential guide for MEMS engineers or researchers who are trained in engineering institutes that do not provide the background or knowledge

  7. Einstein's Mirror

    Science.gov (United States)

    Gjurchinovski, Aleksandar; Skeparovski, Aleksandar

    2008-01-01

    Reflection of light from a plane mirror in uniform rectilinear motion is a century-old problem, intimately related to the foundations of special relativity. The problem was first investigated by Einstein in his famous 1905 paper by using the Lorentz transformations to switch from the mirror's rest frame to the frame where the mirror moves at a…

  8. Evaluation of alignment error of micropore X-ray optics caused by hot plastic deformation

    Science.gov (United States)

    Numazawa, Masaki; Ishi, Daiki; Ezoe, Yuichiro; Takeuchi, Kazuma; Terada, Masaru; Fujitani, Maiko; Ishikawa, Kumi; Nakajima, Kazuo; Morishita, Kohei; Ohashi, Takaya; Mitsuda, Kazuhisa; Nakamura, Kasumi; Noda, Yusuke

    2018-06-01

    We report on the evaluation and characterization of micro-electromechanical system (MEMS) X-ray optics produced by silicon dry etching and hot plastic deformation. Sidewalls of micropores formed by etching through a silicon wafer are used as X-ray reflecting mirrors. The wafer is deformed into a spherical shape to focus parallel incidence X-rays. We quantitatively evaluated a mirror alignment error using an X-ray pencil beam (Al Kα line at 1.49 keV). The deviation angle caused only by the deformation was estimated from angular shifts of the X-ray focusing point before and after the deformation to be 2.7 ± 0.3 arcmin on average within the optics. This gives an angular resolution of 12.9 ± 1.4 arcmin in half-power diameter (HPD). The surface profile of the deformed optics measured using a NH-3Ns surface profiler (Mitaka Kohki) also indicated that the resolution was 11.4 ± 0.9 arcmin in HPD, suggesting that we can simply evaluate the alignment error caused by the hot plastic deformation.

  9. Microelectromechanical (MEM) thermal actuator

    Science.gov (United States)

    Garcia, Ernest J [Albuquerque, NM; Fulcher, Clay W. G. [Sandia Park, NM

    2012-07-31

    Microelectromechanical (MEM) buckling beam thermal actuators are disclosed wherein the buckling direction of a beam is constrained to a desired direction of actuation, which can be in-plane or out-of-plane with respect to a support substrate. The actuators comprise as-fabricated, linear beams of uniform cross section supported above the substrate by supports which rigidly attach a beam to the substrate. The beams can be heated by methods including the passage of an electrical current through them. The buckling direction of an initially straight beam upon heating and expansion is controlled by incorporating one or more directional constraints attached to the substrate and proximal to the mid-point of the beam. In the event that the beam initially buckles in an undesired direction, deformation of the beam induced by contact with a directional constraint generates an opposing force to re-direct the buckling beam into the desired direction. The displacement and force generated by the movement of the buckling beam can be harnessed to perform useful work, such as closing contacts in an electrical switch.

  10. Chiral mirrors

    International Nuclear Information System (INIS)

    Plum, Eric; Zheludev, Nikolay I.

    2015-01-01

    Mirrors are used in telescopes, microscopes, photo cameras, lasers, satellite dishes, and everywhere else, where redirection of electromagnetic radiation is required making them arguably the most important optical component. While conventional isotropic mirrors will reflect linear polarizations without change, the handedness of circularly polarized waves is reversed upon reflection. Here, we demonstrate a type of mirror reflecting one circular polarization without changing its handedness, while absorbing the other. The polarization-preserving mirror consists of a planar metasurface with a subwavelength pattern that cannot be superimposed with its mirror image without being lifted out of its plane, and a conventional mirror spaced by a fraction of the wavelength from the metasurface. Such mirrors enable circularly polarized lasers and Fabry-Pérot cavities with enhanced tunability, gyroscopic applications, polarization-sensitive detectors of electromagnetic waves, and can be used to enhance spectroscopies of chiral media

  11. Modularly Integrated MEMS Technology

    National Research Council Canada - National Science Library

    Eyoum, Marie-Angie N

    2006-01-01

    Process design, development and integration to fabricate reliable MEMS devices on top of VLSI-CMOS electronics without damaging the underlying circuitry have been investigated throughout this dissertation...

  12. Heterogeneous MEMS device assembly and integration

    Science.gov (United States)

    Topart, Patrice; Picard, Francis; Ilias, Samir; Alain, Christine; Chevalier, Claude; Fisette, Bruno; Paultre, Jacques E.; Généreux, Francis; Legros, Mathieu; Lepage, Jean-François; Laverdière, Christian; Ngo Phong, Linh; Caron, Jean-Sol; Desroches, Yan

    2014-03-01

    In recent years, smart phone applications have both raised the pressure for cost and time to market reduction, and the need for high performance MEMS devices. This trend has led the MEMS community to develop multi-die packaging of different functionalities or multi-technology (i.e. wafer) approaches to fabricate and assemble devices respectively. This paper reports on the fabrication, assembly and packaging at INO of various MEMS devices using heterogeneous assembly at chip and package-level. First, the performance of a giant (e.g. about 3 mm in diameter), electrostatically actuated beam steering mirror is presented. It can be rotated about two perpendicular axes to steer an optical beam within an angular cone of up to 60° in vector scan mode with an angular resolution of 1 mrad and a response time of 300 ms. To achieve such angular performance relative to mirror size, the microassembly was performed from sub-components fabricated from 4 different wafers. To combine infrared detection with inertial sensing, an electroplated proof mass was flip-chipped onto a 256×1 pixel uncooled bolometric FPA and released using laser ablation. In addition to the microassembly technology, performance results of packaged devices are presented. Finally, to simulate a 3072×3 pixel uncooled detector for cloud and fire imaging in mid and long-wave IR, the staggered assembly of six 512×3 pixel FPAs with a less than 50 micron pixel co-registration is reported.

  13. Integrated design of MEMS

    DEFF Research Database (Denmark)

    De Grave, Arnaud; Brissaud, Daniel

    2007-01-01

    Emerging technologies of Micro-Electromechanical Systems (MEMS) are applications such as airbag accelerometers. Micro-products present many physical differences from macro-products. Moreover, there is a high level of integration in multiple fields of physics with strongly coupled effects...... industrial immersion to propose a socio-technological description of the design process and MEMS design tools....

  14. Mirror symmetry

    CERN Document Server

    Voisin, Claire

    1999-01-01

    This is the English translation of Professor Voisin's book reflecting the discovery of the mirror symmetry phenomenon. The first chapter is devoted to the geometry of Calabi-Yau manifolds, and the second describes, as motivation, the ideas from quantum field theory that led to the discovery of mirror symmetry. The other chapters deal with more specialized aspects of the subject: the work of Candelas, de la Ossa, Greene, and Parkes, based on the fact that under the mirror symmetry hypothesis, the variation of Hodge structure of a Calabi-Yau threefold determines the Gromov-Witten invariants of its mirror; Batyrev's construction, which exhibits the mirror symmetry phenomenon between hypersurfaces of toric Fano varieties, after a combinatorial classification of the latter; the mathematical construction of the Gromov-Witten potential, and the proof of its crucial property (that it satisfies the WDVV equation), which makes it possible to construct a flat connection underlying a variation of Hodge structure in the ...

  15. Einstein's Mirror

    Science.gov (United States)

    Gjurchinovski, Aleksandar; Skeparovski, Aleksandar

    2008-10-01

    Reflection of light from a plane mirror in uniform rectilinear motion is a century-old problem, intimately related to the foundations of special relativity.1-4 The problem was first investigated by Einstein in his famous 1905 paper by using the Lorentz transformations to switch from the mirror's rest frame to the frame where the mirror moves at a constant velocity.5 Einstein showed an intriguing fact that the usual law of reflection would not hold in the case of a uniformly moving mirror, that is, the angles of incidence and reflection of the light would not equal each other. Later on, it has been shown that the law of reflection at a moving mirror can be obtained in various alternative ways,6-10 but none of them seems suitable for bringing this interesting subject into the high school classroom.

  16. Droplet Epitaxy Image Contrast in Mirror Electron Microscopy

    Science.gov (United States)

    Kennedy, S. M.; Zheng, C. X.; Jesson, D. E.

    2017-01-01

    Image simulation methods are applied to interpret mirror electron microscopy (MEM) images obtained from a movie of GaAs droplet epitaxy. Cylindrical symmetry of structures grown by droplet epitaxy is assumed in the simulations which reproduce the main features of the experimental MEM image contrast, demonstrating that droplet epitaxy can be studied in real-time. It is therefore confirmed that an inner ring forms at the droplet contact line and an outer ring (or skirt) occurs outside the droplet periphery. We believe that MEM combined with image simulations will be increasingly used to study the formation and growth of quantum structures.

  17. On four dimensional mirror symmetry

    International Nuclear Information System (INIS)

    Losev, A.; Nekrasov, N.; Shatashvili, S.

    2000-01-01

    A conjecture relating instanton calculus in four dimensional supersymmetric theories and the deformation theory of Lagrangian submanifolds in C 2r invariant under a (subgroup of) Sp(2r,Z) is formulated. This is a four dimensional counterpart of the mirror symmetry of topological strings (relating Gromov-Witten invariants and generalized variations of Hodge structure). (orig.)

  18. Mirror, mirror on the wall

    CERN Multimedia

    2005-01-01

    RICH 2, one of the two Ring Imaging Cherenkov detectors of the LHCb experiment, is being prepared to join the other detector elements ready for the first proton-proton collisions at LHC. The mirrors of the RICH2 detector are meticulously assembled in a clean room.In a large dark room, men in white move around an immense structure some 7 metres high, 10 metres wide and nearly 2.5 metres deep. Apparently effortlessly, they are installing the two large high-precision spherical mirrors. These mirrors will focus Cherenkov light, created by the charged particles that will traverse this detector, onto the photon detectors. Each spherical mirror wall is made up of facets like a fly's eye. Twenty-eight individual thin glass mirrors will all point to the same point in space to within a few micro-radians. The development of these mirrors has been technically demanding : Ideally they should be massless, sturdy, precise and have high reflectivity. In practice, though not massless, they are made from a mere 6 mm thin gl...

  19. Electroplating of low stress permalloy for MEMS

    International Nuclear Information System (INIS)

    Zhang Yonghua; Ding Guifu; Cai Yuli; Wang Hong; Cai Bingchu

    2006-01-01

    With the wafer-bending method and spectrophotometry, the internal stress in electroplated Ni-Fe alloy for MEMS has been investigated as a function of bath concentration. This investigation demonstrated that low concentration plating solution is useful for the decrease of the residual stress in the electrodeposits, and the stress could further decrease with an increase of saccharin additive content. And the change of stress from tensile to compressive was not observed with the increase of the additive content in plating path. The low stress permalloy (Ni 81 Fe 19 ) was reached in our experimental conditions. A bistable electromagnetic RF MEMS switch with deformation-free bilayer cantilever beam was fabricated successfully by electroplated permalloy

  20. High Efficiency Optical MEMS by the Integration of Photonic Lattices with Surface MEMS

    Energy Technology Data Exchange (ETDEWEB)

    FLEMING, JAMES G.; LIN, SHAWN-YU; MANI, SEETHAMBAL S.; RODGERS, M. STEVEN; DAGEL, DARYL J.

    2002-11-01

    This report outlines our work on the integration of high efficiency photonic lattice structures with MEMS (MicroElectroMechanical Systems). The simplest of these structures were based on 1-D mirror structures. These were integrated into a variety of devices, movable mirrors, switchable cavities and finally into Bragg fiber structures which enable the control of light in at least 2 dimensions. Of these devices, the most complex were the Bragg fibers. Bragg fibers consist of hollow tubes in which light is guided in a low index media (air) and confined by surrounding Bragg mirror stacks. In this work, structures with internal diameters from 5 to 30 microns have been fabricated and much larger structures should also be possible. We have demonstrated the fabrication of these structures with short wavelength band edges ranging from 400 to 1600nm. There may be potential applications for such structures in the fields of integrated optics and BioMEMS. We have also looked at the possibility of waveguiding in 3 dimensions by integrating defects into 3-dimensional photonic lattice structures. Eventually it may be possible to tune such structures by mechanically modulating the defects.

  1. Advanced Mechatronics and MEMS Devices

    CERN Document Server

    2013-01-01

    Advanced Mechatronics and MEMS Devicesdescribes state-of-the-art MEMS devices and introduces the latest technology in electrical and mechanical microsystems. The evolution of design in microfabrication, as well as emerging issues in nanomaterials, micromachining, micromanufacturing and microassembly are all discussed at length in this volume. Advanced Mechatronics also provides a reader with knowledge of MEMS sensors array, MEMS multidimensional accelerometer, artificial skin with imbedded tactile components, as well as other topics in MEMS sensors and transducers. The book also presents a number of topics in advanced robotics and an abundance of applications of MEMS in robotics, like reconfigurable modular snake robots, magnetic MEMS robots for drug delivery and flying robots with adjustable wings, to name a few. This book also: Covers the fundamentals of advanced mechatronics and MEMS devices while also presenting new state-of-the-art methodology and technology used in the application of these devices Prese...

  2. [Mirror neurons].

    Science.gov (United States)

    Rubia Vila, Francisco José

    2011-01-01

    Mirror neurons were recently discovered in frontal brain areas of the monkey. They are activated when the animal makes a specific movement, but also when the animal observes the same movement in another animal. Some of them also respond to the emotional expression of other animals of the same species. These mirror neurons have also been found in humans. They respond to or "reflect" actions of other individuals in the brain and are thought to represent the basis for imitation and empathy and hence the neurobiological substrate for "theory of mind", the potential origin of language and the so-called moral instinct.

  3. Piezoelectric MEMS resonators

    CERN Document Server

    Piazza, Gianluca

    2017-01-01

    This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associate...

  4. Going Fabless with MEMS

    Directory of Open Access Journals (Sweden)

    Bhaskar CHOUBEY

    2011-04-01

    Full Text Available The Microelectromechanical sensors are finding increasing applications in everyday life. However, each MEMS sensor is generally fabricated on its own individual process. This leads to high cost per sensor. It has been suggested the MEMS should and would follow the path of integrated circuits industry, wherein fabless firms could concentrate on design leading pure-foundries to perfect the manufacturing process. With several designs being manufactured on the same process, the installation cost of fabrication would be evenly shared. Simultaneously, multiple project wafer runs are being offered for MEMS processes to encourage design activity in universities as well as startups. This paper reviews the present state of this transition through an experience of designing and manufacturing microelectromechanical resonators on different processes.

  5. MEMS fluidic actuator

    Science.gov (United States)

    Kholwadwala, Deepesh K [Albuquerque, NM; Johnston, Gabriel A [Trophy Club, TX; Rohrer, Brandon R [Albuquerque, NM; Galambos, Paul C [Albuquerque, NM; Okandan, Murat [Albuquerque, NM

    2007-07-24

    The present invention comprises a novel, lightweight, massively parallel device comprising microelectromechanical (MEMS) fluidic actuators, to reconfigure the profile, of a surface. Each microfluidic actuator comprises an independent bladder that can act as both a sensor and an actuator. A MEMS sensor, and a MEMS valve within each microfluidic actuator, operate cooperatively to monitor the fluid within each bladder, and regulate the flow of the fluid entering and exiting each bladder. When adjacently spaced in a array, microfluidic actuators can create arbitrary surface profiles in response to a change in the operating environment of the surface. In an embodiment of the invention, the profile of an airfoil is controlled by independent extension and contraction of a plurality of actuators, that operate to displace a compliant cover.

  6. Development of a Piezoelectric Adaptive Mirror for Laser Beam Control

    CSIR Research Space (South Africa)

    Long, CS

    2008-06-01

    Full Text Available piezoelectric disc, providing a small, low-cost deformable mirror for this application. The mirror is required to be able to deform in the shape of each of the lower order Zernike polynomials, which describe aberrations in optical systems. Numerical modelling...

  7. Digital reflection holography based systems development for MEMS testing

    Science.gov (United States)

    Singh, Vijay Raj; Liansheng, Sui; Asundi, Anand

    2010-05-01

    MEMS are tiny mechanical devices that are built onto semiconductor chips and are measured in micrometers and nanometers. Testing of MEMS device is an important part in carrying out their functional assessment and reliability analysis. Development of systems based on digital holography (DH) for MEMS inspection and characterization is presented in this paper. Two DH reflection systems, table-top and handheld types, are developed depending on the MEMS measurement requirements and their capabilities are presented. The methodologies for the systems are developed for 3D profile inspection and static & dynamic measurements, which is further integrated with in-house developed software that provides the measurement results in near real time. The applications of the developed systems are demonstrated for different MEMS devices for 3D profile inspection, static deformation/deflection measurements and vibration analysis. The developed systems are well suitable for the testing of MEMS and Microsystems samples, with full-field, static & dynamic inspection as well as to monitor micro-fabrication process.

  8. Mid infrared MEMS FTIR spectrometer

    Science.gov (United States)

    Erfan, Mazen; Sabry, Yasser M.; Mortada, Bassem; Sharaf, Khaled; Khalil, Diaa

    2016-03-01

    In this work we report, for the first time to the best of our knowledge, a bulk-micromachined wideband MEMS-based spectrometer covering both the NIR and the MIR ranges and working from 1200 nm to 4800 nm. The core engine of the spectrometer is a scanning Michelson interferometer micro-fabricated using deep reactive ion etching (DRIE) technology. The spectrum is obtained using the Fourier Transform techniques that allows covering a very wide spectral range limited by the detector responsivity. The moving mirror of the interferometer is driven by a relatively large stroke electrostatic comb-drive actuator. Zirconium fluoride (ZrF4) multimode optical fibers are used to connect light between the white light source and the interferometer input, as well as the interferometer output to a PbSe photoconductive detector. The recorded signal-to-noise ratio is 25 dB at the wavelength of 3350 nm. The spectrometer is successfully used in measuring the absorption spectra of methylene chloride, quartz glass and polystyrene film. The presented solution provides a low cost method for producing miniaturized spectrometers in the near-/mid-infrared.

  9. EDITORIAL: International MEMS Conference 2006

    Science.gov (United States)

    Tay, Francis E. H.; Jianmin, Miao; Iliescu, Ciprian

    2006-04-01

    The International MEMS conference (iMEMS2006) organized by the Institute of Bioengineering and Nanotechnology and Nanyang Technological University aims to provide a platform for academicians, professionals and industrialists in various related fields from all over the world to share and learn from each other. Of great interest is the incorporation of the theme of life sciences application using MEMS. It is the desire of this conference to initiate collaboration and form network of cooperation. This has continued to be the objective of iMEMS since its inception in 1997. The technological advance of MEMS over the past few decades has been truly exciting in terms of development and applications. In order to participate in this rapid development, a conference involving delegates from within the MEMS community and outside the community is very meaningful and timely. With the receipt of over 200 articles, delegates related to MEMS field from all over the world will share their perspectives on topics such as MEMS/MST Design, MEMS Teaching and Education, MEMS/MST Packaging, MEMS/MST Fabrication, Microsystems Applications, System Integration, Wearable Devices, MEMSWear and BioMEMS. Invited speakers and delegates from outside the field have also been involved to provide challenges, especially in the life sciences field, for the MEMS community to potentially address. The proceedings of the conference will be published as an issue in the online Journal of Physics: Conference Series and this can reach a wider audience and will facilitate the reference and citation of the work presented in the conference. We wish to express our deep gratitude to the International Scientific Committee members and the organizing committee members for contributing to the success of this conference. We would like to thank all the delegates, speakers and sponsors from all over the world for presenting and sharing their perspectives on topics related to MEMS and the challenges that MEMS can

  10. Mirror systems.

    Science.gov (United States)

    Fogassi, Leonardo; Ferrari, Pier Francesco

    2011-01-01

    Mirror neurons are a class of visuomotor neurons, discovered in the monkey premotor cortex and in an anatomically connected area of the inferior parietal lobule, that activate both during action execution and action observation. They constitute a circuit dedicated to match actions made by others with the internal motor representations of the observer. It has been proposed that this matching system enables individuals to understand others' behavior and motor intentions. Here we will describe the main features of mirror neurons in monkeys. Then we will present evidence of the presence of a mirror system in humans and of its involvement in several social-cognitive functions, such as imitation, intention, and emotion understanding. This system may have several implications at a cognitive level and could be linked to specific social deficits in humans such as autism. Recent investigations addressed the issue of the plasticity of the mirror neuron system in both monkeys and humans, suggesting also their possible use in rehabilitation. WIREs Cogn Sci 2011 2 22-38 DOI: 10.1002/wcs.89 For further resources related to this article, please visit the WIREs website. Copyright © 2010 John Wiley & Sons, Ltd.

  11. Fast tunable blazed MEMS grating for external cavity lasers

    Science.gov (United States)

    Tormen, Maurizio; Niedermann, Philippe; Hoogerwerf, Arno; Shea, Herbert; Stanley, Ross

    2017-11-01

    Diffractive MEMS are interesting for a wide range of applications, including displays, scanners or switching elements. Their advantages are compactness, potentially high actuation speed and in the ability to deflect light at large angles. We have designed and fabricated deformable diffractive MEMS grating to be used as tuning elements for external cavity lasers. The resulting device is compact, has wide tunability and a high operating speed. The initial design is a planar grating where the beams are free-standing and attached to each other using leaf springs. Actuation is achieved through two electrostatic comb drives at either end of the grating. To prevent deformation of the free-standing grating, the device is 10 μm thick made from a Silicon on Insulator (SOI) wafer in a single mask process. At 100V a periodicity tuning of 3% has been measured. The first resonant mode of the grating is measured at 13.8 kHz, allowing high speed actuation. This combination of wide tunability and high operating speed represents state of the art in the domain of tunable MEMS filters. In order to improve diffraction efficiency and to expand the usable wavelength range, a blazed version of the deformable MEMS grating has been designed. A key issue is maintaining the mechanical properties of the original device while providing optically smooth blazed beams. Using a process based on anisotropic KOH etching, blazed gratings have been obtained and preliminary characterization is promising.

  12. MEMS and the microbe

    NARCIS (Netherlands)

    Ingham, C.J.; Vlieg, J.E.T.V.H.

    2008-01-01

    In recent years, relatively simple MEMS fabrications have helped accelerate our knowledge of the microbial cell. Current progress and challenges in the application of lab-on-a-chip devices to the viable microbe are reviewed. Furthermore, the degree to which microbiologists are becoming the engineers

  13. Microelectromechanical Systems (MEMS)

    Indian Academy of Sciences (India)

    As a field, Microelectromechanical Systems (MEMS) has matured over the last two decades to have several scientific journals dedicated to it. These journals are instrumental in bringing out the interdisciplinary nature of research that the field demands. In the beginning, most papers were process centric where realization of ...

  14. Microelectromechanical Systems (MEMS)

    Indian Academy of Sciences (India)

    to have several scientific journals dedicated to it. These journals are instrumental in bringing out the interdisciplinary nature of research that the field demands. In the beginning, most papers were process centric where realization of a MEMS device or structure using conven- tional CMOS processes or their variants was the ...

  15. MEMS Solar Generators

    OpenAIRE

    Grbovic, Dragoslav; Osswald, Sebastian

    2011-01-01

    Approved for public release; distribution is unlimited Using MEMS bimaterial structures to build highly efficient solar energy generators. This is a novel approach that utilizes developments in the area of bimaterial sensors and applies them in the field of solar energy harvesting.

  16. What do mirror neurons mirror?

    NARCIS (Netherlands)

    Uithol, S.; Rooij, I.J.E.I. van; Bekkering, H.; Haselager, W.F.G.

    2011-01-01

    Single cell recordings in monkeys provide strong evidence for an important role of the motor system in action understanding. This evidence is backed up by data from studies of the (human) mirror neuron system using neuroimaging or TMS techniques, and behavioral experiments. Although the data

  17. European MEMS foundries

    Science.gov (United States)

    Salomon, Patric R.

    2003-01-01

    According to the latest release of the NEXUS market study, the market for MEMS or Microsystems Technology (MST) is predicted to grow to $68B by the year 2005, with systems containing these components generating even higher revenues and growth. The latest advances in MST/MEMS technology have enabled the design of a new generation of microsystems that are smaller, cheaper, more reliable, and consume less power. These integrated systems bring together numerous analog/mixed signal microelectronics blocks and MEMS functions on a single chip or on two or more chips assembled within an integrated package. In spite of all these advances in technology and manufacturing, a system manufacturer either faces a substantial up-front R&D investment to create his own infrastructure and expertise, or he can use design and foundry services to get the initial product into the marketplace fast and with an affordable investment. Once he has a viable product, he can still think about his own manufacturing efforts and investments to obtain an optimized high volume manufacturing for the specific product. One of the barriers to successful exploitation of MEMS/MST technology has been the lack of access to industrial foundries capable of producing certified microsystems devices in commercial quantities, including packaging and test. This paper discusses Multi-project wafer (MPW) runs, requirements for foundries and gives some examples of foundry business models. Furthermore, this paper will give an overview on MST/MEMS services that are available in Europe, including pure commercial activities, European project activities (e.g. Europractice), and some academic services.

  18. Mirror monochromator

    Energy Technology Data Exchange (ETDEWEB)

    Mankos, Marian [Electron Optica, Inc., Palo Alto, CA (United States); Shadman, Khashayar [Electron Optica, Inc., Palo Alto, CA (United States)

    2014-12-02

    In this SBIR project, Electron Optica, Inc. (EOI) is developing a mirror electron monochromator (MirrorChrom) attachment to new and retrofitted electron microscopes (EMs) for improving the energy resolution of the EM from the characteristic range of 0.2-0.5 eV to the range of 10-50 meV. This improvement will enhance the characterization of materials by imaging and spectroscopy. In particular, the monochromator will refine the energy spectra characterizing materials, as obtained from transmission EMs [TEMs] fitted with electron spectrometers, and it will increase the spatial resolution of the images of materials taken with scanning EMs (SEMs) operated at low voltages. EOI’s MirrorChrom technology utilizes a magnetic prism to simultaneously deflect the electron beam off the axis of the microscope column by 90° and disperse the electrons in proportional to their energies into a module with an electron mirror and a knife-edge. The knife-edge cuts off the tails of the energy distribution to reduce the energy spread of the electrons that are reflected, and subsequently deflected, back into the microscope column. The knife-edge is less prone to contamination, and thereby charging, than the conventional slits used in existing monochromators, which improves the reliability and stability of the module. The overall design of the MirrorChrom exploits the symmetry inherent in reversing the electron trajectory in order to maintain the beam brightness – a parameter that impacts how well the electron beam can be focused downstream onto a sample. During phase I, EOI drafted a set of candidate monochromator architectures and evaluated the trade-offs between energy resolution and beam current to achieve the optimum design for three particular applications with market potential: increasing the spatial resolution of low voltage SEMs, increasing the energy resolution of low voltage TEMs (beam energy of 5-20 keV), and increasing the energy resolution of conventional TEMs (beam

  19. Mirror systems

    International Nuclear Information System (INIS)

    Howells, M.R.

    1985-12-01

    The physics of VUV and x-ray reflection is reviewed. The main functions of mirrors in synchrotron beamlines are stated briefly and include deflection, filtration, power absorption, formation of a real image of the source, focusing, and collimation. Methods of fabrication of optical surfaces are described. Types of imperfections are discussed, including, aberrations, surface figure inaccuracy, roughness, and degradation due to use. Calculation of the photon beam thermal load, including computer modelling, is considered. 50 refs., 7 figs

  20. Converting MEMS technology into profits

    Science.gov (United States)

    Bryzek, Janusz

    1998-08-01

    This paper discusses issues related to transitioning a company from the advanced technology development phase (with a particular focus on MEMS) to a profitable business, with emphasis on start-up companies. It includes several case studies from (primarily) NovaSensor MEMS development history. These case studies illustrate strategic problems with which advanced MEMS technology developers have to be concerned. Conclusions from these case studies could be used as checkpoints for future MEMS developers to increase probability of profitable operations. The objective for this paper is to share the author's experience from multiple MEMS start-ups to accelerate development of the MEMS market by focusing state- of-the-art technologists on marketing issues.

  1. From MEMS to nanomachine

    International Nuclear Information System (INIS)

    Esashi, Masayoshi; Ono, Takahito

    2005-01-01

    Practically applicable microelectromechanical systems (MEMS) and nanomachines have been developed by applying dry processes. Deep reactive ion etching (RIE) of silicon and its applications to an electrostatically levitated rotational gyroscope, a fibre optic blood pressure sensor and in micro-actuated probes are described. High density electrical feedthrough in glass is made using deep RIE of glass and electroplating of metal. Multi-probe data storage system has been developed using the high density electrical feedthrough in glass. Chemical vapour deposition (CVD) of different materials have been developed for MEMS applications; trench-refill using SiO 2 CVD, microstructures using Silicon carbide CVD for glass mold press and selective CVD of carbon nanotube for electron field emitter. Multi-column electron beam lithography system has been developed using the electron field emitter. (topical review)

  2. Eye-safe diode laser Doppler lidar with a MEMS beam-scanner

    DEFF Research Database (Denmark)

    Hu, Qi; Pedersen, Christian; Rodrigo, Peter John

    2016-01-01

    We present a novel Doppler lidar that employs a cw diode laser operating at 1.5 μm and a micro-electro-mechanical-system scanning mirror (MEMS-SM). In this work, two functionalities of the lidar system are demonstrated. Firstly, we describe the capability to effectively steer the lidar probe beam...

  3. Mirror fusion reactors

    International Nuclear Information System (INIS)

    Anon.

    1978-01-01

    Conceptual design studies were made of fusion reactors based on the three current mirror-confinement concepts: the standard mirror, the tandem mirror, and the field-reversed mirror. Recent studies of the standard mirror have emphasized its potential as a fusion-fission hybrid reactor, designed to produce fuel for fission reactors. We have designed a large commercial hybrid and a small pilot-plant hybrid based on standard mirror confinement. Tandem mirror designs include a commercial 1000-MWe fusion power plant and a nearer term tandem mirror hybrid. Field-reversed mirror designs include a multicell commercial reactor producing 75 MWe and a single-cell pilot plant

  4. Mirror fusion reactors

    International Nuclear Information System (INIS)

    Carlson, G.A.; Moir, R.W.

    1978-01-01

    We have carried out conceptual design studies of fusion reactors based on the three current mirror confinement concepts: the standard mirror, the tandem mirror, and the field-reversed mirror. Recent studies of the standard mirror have emphasized its potential as a fusion-fission hybrid reactor, designed to produce fission fuel for fission reactors. We have designed a large commercial hybrid based on standard mirror confinement, and also a small pilot plant hybrid. Tandem mirror designs include a commercial 1000 MWe fusion power plant and a nearer term tandem mirror hybrid. Field-reversed mirror designs include a multicell commercial reactor producing 75 MWe and a single cell pilot plant

  5. Topology optimized RF MEMS switches

    DEFF Research Database (Denmark)

    Philippine, M. A.; Zareie, H.; Sigmund, Ole

    2013-01-01

    Topology optimization is a rigorous and powerful method that should become a standard MEMS design tool - it can produce unique and non-intuitive designs that meet complex objectives and can dramatically improve the performance and reliability of MEMS devices. We present successful uses of topology...

  6. Electromagnetic actuation in MEMS switches

    DEFF Research Database (Denmark)

    Oliveira Hansen, Roana Melina de; Mátéfi-Tempfli, Mária; Chemnitz, Steffen

    . Electromagnetic actuation is a very promising approach to operate such MEMS and Power MEMS devices, due to the long range, reproducible and strong forces generated by this method, among other advantages. However, the use of electromagnetic actuation in such devices requires the use of thick magnetic films, which...

  7. Adaptive metal mirror for high-power CO2 lasers

    Science.gov (United States)

    Jarosch, Uwe-Klaus

    1996-08-01

    Spherical mirrors with a variable radius of curvature are used inside laser resonators as well as in the beam path between the laser and the workpiece. Commercially-available systems use piezoelectric actuators, or the pressure of the coolant, to deform the mirror surface. In both cases, the actuator and the cooling system influence each other. This interaction is avoided through the integration of the cooling system with the flexible mirror membrane. A multi- channel design leads to an optimized cooling effect, which is necessary for high power applications. The contour of the variable metal mirror depends on the mounting between the membrane and the mirror body and on the distribution of forces. Four cases of deformation can be distinguished for a circular elastic membrane. The realization of an adaptive metal mirror requires a technical compromise to be made. A mechanical construction is presented which combines an elastic hinge with the inlet and outlet of the coolant. For the deformation of the mirror membranes two actuators with different character of deformation are used. The superposition of the two deformations results in smaller deviations from the spherical surface shape than can be achieved using a single actuator. DC proportional magnets have been introduced as cheap and rigid actuators. The use of this adaptive mirror, either in a low pressure atmosphere of a gas laser resonator, or in an extra-cavity beam path is made possible through the use of a ventilation system.

  8. Adaptive deformable mirror : based on electromagnetic actuators

    NARCIS (Netherlands)

    Hamelinck, R.F.M.M.

    2010-01-01

    Refractive index variations in the earth's atmosphere cause wavefront aberrations and limit thereby the resolution in ground-based telescopes. With Adaptive Optics (AO) the temporally and spatially varying wavefront distortions can be corrected in real time. Most implementations in a ground based

  9. High Bandwidth, Fine Resolution Deformable Mirror Design.

    Science.gov (United States)

    1980-03-01

    Low Temperature Solders 68 B.6 Influence Function Parameters 68 APPENDIX C 19 Capacitance Measurement 69 ACCESSION for NTIS white Sectloo ODC Buff...Multilayer actuator: Dilatation versus applied electric field 10 Figure 3 - Multilayer actuator: Influence function 11 Figure 4 - Honeycomb device...bimorph 20 Figure 8 - Bimorph device: Influence function of a bimorph device which has a glass plate 0.20 cm thick 24 Figure 9 - Bimorph device

  10. Dynamic Characterization of Thin Deformable PVDF Mirror

    National Research Council Canada - National Science Library

    Trad, Eric M

    2005-01-01

    ... of -2.1 micro with a standard deviation of 0.33 micro when 400 volts are applied. The acquisition system was characterized for dynamic actuation of the surface and found to have a sample rate ranging from 4 to 14 Hz. This rate is found to be dependent upon the desired detail level of the surface description as calculated by the wavefront analysis software.

  11. Adaptive deformable mirror dynamics and modular control

    NARCIS (Netherlands)

    Ellenbroek, R.M.L.

    2011-01-01

    The refractive index of air varies a.o. with temperature, humidity, pressure and the CO2 concentration. Due to atmospheric turbulence this refractive index varies both in space and in time, leading to aberrations in images of light having passed though it. These aberrations limit the achievable

  12. Three dimensional MEMS supercapacitors

    Energy Technology Data Exchange (ETDEWEB)

    Sun, Wei

    2011-10-15

    The overall objective of this research is to achieve compact supercapacitors with high capacitance, large power density, and long cycle life for using as micro power sources to drive low power devices and sensors. The main shortcoming of supercapacitors as a power source is that its energy density typically is about 1/10 of that of batteries. To achieve compact supercapacitors of large energy density, supercapacitors must be developed with high capacitance and power density which are mainly depended on the effective surface area of the electrodes of the supercapacitors. Many studies have been done to increase the effective surface area by modifying the electrode materials, however, much less investigations are focus on machining the electrodes. In my thesis work, micro- and nano-technologies are applied as technology approaches for machining the electrodes with three dimensional (3D) microstructures. More specific, Micro-electro-mechanical system (MEMS) fabrication process flow, which integrates the key process such as LIGA-like (German acronym for Lithographie, Galvanoformung, Abformung, which mean Lithography, Electroplating and Molding) technology or DRIE (deep reactive ion etching), has been developed to enable innovative designs of 3D MEMS supercapacitors which own the electrodes of significantly increased geometric area. Two types of 3D MEMS supercapcitors, based on LIGA-like and DRIE technology respectively, were designed and successfully created. The LIGA-like based 3D MEMS supercapacitor is with an interdigital 3D structure, and consists of silicon substrate, two electroplated nickel current collectors, two PPy (poly pyrrole) electrodes, and solid state electrolyte. The fabrication process flow developed includes the flowing key processes, SU-8 lithography, nickel electroplating, PPy polymerization and solid state electrolyte coating. Electrochemical tests showed that the single electrode of the supercapacitor has the specific capacitance of 0.058 F cm-2

  13. MEMS cost analysis from laboratory to industry

    CERN Document Server

    Freng, Ron Lawes

    2016-01-01

    The World of MEMS; Chapter 2: Basic Fabrication Processes; Chapter 3: Surface Microengineering. High Aspect Ratio Microengineering; Chapter 5: MEMS Testing; Chapter 6: MEMS Packaging. Clean Rooms, Buildings and Plant; Chapter 8: The MEMSCOST Spreadsheet; Chapter 9: Product Costs - Accelerometers. Product Costs - Microphones. MEMS Foundries. Financial Reporting and Analysis. Conclusions.

  14. DMD reliability: a MEMS success story

    Science.gov (United States)

    Douglass, Michael

    2003-01-01

    The Digital Micromirror Device (DMD) developed by Texas Instruments (TI) has made tremendous progress in both performance and reliability since it was first invented in 1987. From the first working concept of a bistable mirror, the DMD is now providing high-brightness, high-contrast, and high-reliability in over 1,500,000 projectors using Digital Light Processing technology. In early 2000, TI introduced the first DMD chip with a smaller mirror (14-micron pitch versus 17-micron pitch). This allowed a greater number of high-resolution DMD chips per wafer, thus providing an increased output capacity as well as the flexibility to use existing package designs. By using existing package designs, subsequent DMDs cost less as well as met our customers' demand for faster time to market. In recent years, the DMD achieved the status of being a commercially successful MEMS device. It reached this status by the efforts of hundreds of individuals working toward a common goal over many years. Neither textbooks nor design guidelines existed at the time. There was little infrastructure in place to support such a large endeavor. The knowledge we gained through our characterization and testing was all we had available to us through the first few years of development. Reliability was only a goal in 1992 when production development activity started; a goal that many throughout the industry and even within Texas Instruments doubted the DMD could achieve. The results presented in this paper demonstrate that we succeeded by exceeding the reliability goals.

  15. Fringe-tunable electrothermal Fresnel mirror for use in compact and high-speed diffusion sensor.

    Science.gov (United States)

    Kiuchi, Yuki; Taguchi, Yoshihiro; Nagasaka, Yuji

    2017-01-23

    This paper reports the development of an electrothermal microelectromechanical systems (MEMS) mirror with serpentine shape actuators. A micro Fresnel mirror with fringe-spacing tunability is required to realize a compact and high-speed diffusion sensor for biological samples whose diffusion coefficient changes significantly because of a conformational change. In this case, the measurement time-constant is dependent on the fringe-spacing and diffusion coefficient of the sample. In this study, a fringe-tunable MEMS mirror with an actuation voltage less than 10 V was developed. The characteristics of the fabricated mirror were investigated experimentally. A high-visibility optical interference fringe was successfully demonstrated using both an ultranarrow-linewidth solid-state laser and a low-cost compact laser diode. The experimental results demonstrated a distinct possibility of developing a measurement device using only simple and low-voltage optical components.

  16. MEMS digital parametric loudspeaker

    KAUST Repository

    Carreno, Armando Arpys Arevalo

    2016-03-23

    This paper reports on the design and fabrication of MEMS actuator arrays suitable for Digital Sound reconstruction and Parametric Directional Loudspeakers. Two distinct versions of the device were fabricated: one using the electrostatic principle actuation and the other one, the piezoelectric principle. Both versions used similar membrane dimensions, with a diameter of 500 μm. These devices are the smallest Micro-Machined Ultrasound Transducer (MUT) arrays that can be operated for both modes: Digital Sound Reconstruction and Parametric Loudspeaker. The chips consist of an array with 256 transducers, in a footprint of 12 mm by 12 mm. The total single chip size is: 2.3 cm by 2.3 cm, including the contact pads. © 2016 IEEE.

  17. Tribology and MEMS

    International Nuclear Information System (INIS)

    Williams, J A; Le, H R

    2006-01-01

    Micro-electro-mechanical system, MEMS, is a rapidly growing interdisciplinary technology dealing with the design and manufacture of miniaturized machines with the major dimensions at the scale of tens, to perhaps hundreds, of micrometres. Because they depend on the cube of a representative dimension, component masses and inertias rapidly become small as size decreases whereas surface and tribological effects, which often depend on area, become increasingly important. Although our explanations of macroscopic tribological phenomena often involve individual events occurring at the micro-scale, when the overall component size is itself miniaturized it may be necessary to re-evaluate some conventional tribological solutions. While the absolute loads are small in such micro-devices, the tribological requirements, especially in terms of longevity-which may be limited by wear rather than friction-are particularly demanding and will require imaginative and novel solutions. (topical review)

  18. MEMS digital parametric loudspeaker

    KAUST Repository

    Carreno, Armando Arpys Arevalo; Castro, David; Conchouso Gonzalez, David; Kosel, Jü rgen; Foulds, Ian G.

    2016-01-01

    This paper reports on the design and fabrication of MEMS actuator arrays suitable for Digital Sound reconstruction and Parametric Directional Loudspeakers. Two distinct versions of the device were fabricated: one using the electrostatic principle actuation and the other one, the piezoelectric principle. Both versions used similar membrane dimensions, with a diameter of 500 μm. These devices are the smallest Micro-Machined Ultrasound Transducer (MUT) arrays that can be operated for both modes: Digital Sound Reconstruction and Parametric Loudspeaker. The chips consist of an array with 256 transducers, in a footprint of 12 mm by 12 mm. The total single chip size is: 2.3 cm by 2.3 cm, including the contact pads. © 2016 IEEE.

  19. Orbifolded Konishi from the Mirror TBA

    NARCIS (Netherlands)

    de Leeuw, M.; van Tongeren, S.J.

    2011-01-01

    Starting with a discussion of the general applicability of the simplified mirror thermodynamic Bethe ansatz (TBA) equations to simple deformations of the AdS5 × S5 superstring, we proceed to study a specific type of orbifold to which the undeformed simplified TBA equations directly apply. We then

  20. Integrated optical MEMS using through-wafer vias and bump-bonding.

    Energy Technology Data Exchange (ETDEWEB)

    McCormick, Frederick Bossert; Frederick, Scott K.

    2008-01-01

    This LDRD began as a three year program to integrate through-wafer vias, micro-mirrors and control electronics with high-voltage capability to yield a 64 by 64 array of individually controllable micro-mirrors on 125 or 250 micron pitch with piston, tip and tilt movement. The effort was a mix of R&D and application. Care was taken to create SUMMiT{trademark} (Sandia's ultraplanar, multilevel MEMS technology) compatible via and mirror processes, and the ultimate goal was to mate this MEMS fabrication product to a complementary metal-oxide semiconductor (CMOS) electronics substrate. Significant progress was made on the via and mirror fabrication and design, the attach process development as well as the electronics high voltage (30 volt) and control designs. After approximately 22 months, the program was ready to proceed with fabrication and integration of the electronics, final mirror array, and through wafer vias to create a high resolution OMEMS array with individual mirror electronic control. At this point, however, mission alignment and budget constraints reduced the last year program funding and redirected the program to help support the through-silicon via work in the Hyper-Temporal Sensors (HTS) Grand Challenge (GC) LDRD. Several months of investigation and discussion with the HTS team resulted in a revised plan for the remaining 10 months of the program. We planned to build a capability in finer-pitched via fabrication on thinned substrates along with metallization schemes and bonding techniques for very large arrays of high density interconnects (up to 2000 x 2000 vias). Through this program, Sandia was able to build capability in several different conductive through wafer via processes using internal and external resources, MEMS mirror design and fabrication, various bonding techniques for arrayed substrates, and arrayed electronics control design with high voltage capability.

  1. Mirror decay of $^{75}$Sr

    CERN Document Server

    Huikari, J; Algora, A; Cederkäll, J; Courtin, S; Dessagne, P; Fraile-Prieto, L M; Franchoo, S; Fynbo, H O U; Huang Wan Xia; Jokinen, A; Knipper, A; Maréchal, F; Miehé, C; Nácher, E; Peräjärvi, K; Poirier, E; Weissman, L; Äystö, J

    2003-01-01

    The beta -decay of /sup 75/Sr to its mirror nucleus /sup 75/Rb was studied at the ISOLDE PSB facility at CERN by means of beta -delayed gamma and proton spectroscopy. The decay Q-value and beta -delayed gamma intensity were measured for the first time. These results, 10.60+or-0.22 MeV and 4.5/sub -0.7//sup +1.9/%, together with accurate measurements of the beta -decay half-life and beta -delayed proton branching ratio yielded the Gamow-Teller strength 0.35+or-0.05 for the mirror transition. Implications of the results on studies of deformation effects and on the path of the rapid proton capture process are discussed. (24 refs).

  2. Secondary mirror system for the European Solar Telescope (EST)

    Science.gov (United States)

    Cavaller, L.; Siegel, B.; Prieto, G.; Hernandez, E.; Casalta, J. M.; Mercader, J.; Barriga, J.

    2010-07-01

    The European Solar Telescope (EST) is a European collaborative project to build a 4m class solar telescope in the Canary Islands, which is now in its design study phase. The telescope will provide diffraction limited performance for several instruments observing simultaneously at the Coudé focus at different wavelengths. A multi-conjugated adaptive optics system composed of a tip-tilt mirror and several deformable mirrors will be integrated in the telescope optical path. The secondary mirror system is composed of the mirror itself (Ø800mm), the alignment drives and the cooling system needed to remove the solar heat load from the mirror. During the design study the feasibility to provide fast tip-tilt capabilities at the secondary mirror to work as the adaptive optics tip-tilt mirror is also being evaluated.

  3. MEMS for automotive and aerospace applications

    CERN Document Server

    Kraft, Michael

    2013-01-01

    MEMS for automotive and aerospace applications reviews the use of Micro-Electro-Mechanical-Systems (MEMS) in developing solutions to the unique challenges presented by the automotive and aerospace industries.Part one explores MEMS for a variety of automotive applications. The role of MEMS in passenger safety and comfort, sensors for automotive vehicle stability control applications and automotive tire pressure monitoring systems are considered, along with pressure and flow sensors for engine management, and RF MEMS for automotive radar sensors. Part two then goes on to explore MEMS for

  4. Mirror symmetry in the presence of branes

    Energy Technology Data Exchange (ETDEWEB)

    Mertens, Adrian

    2011-10-11

    This work deals with mirror symmetry for N=1 compactifications on compact Calabi-Yau threefolds with branes. The mayor tool is a combined deformation space for the Calabi-Yau and a hypersurface within it. Periods of this deformation space contain information about B-type branes within the hypersurface in addition to the usual closed string data. To study these periods we generalize techniques used in closed string mirror symmetry. We derive the Picard-Fuchs system and encode the information in extended toric polytopes. Solutions of the Picard-Fuchs equations give superpotentials for certain brane configurations. This is an efficient way to calculate superpotentials. The deformations we consider are massive for all branes with non trivial superpotential. Depending on a choice of a family of hypersurfaces, the superpotential of the effective low energy theory depends on different massive fields. A priori there is no reason for these fields to be lighter then other fields that are not included. We find however examples where the superpotential is nearly at. In these examples we use the Gauss-Manin connection on the combined deformation space to define an open string mirror map. We find instanton generated superpotentials of A-type branes. This gives predictions for Ooguri-Vafa invariants counting holomorphic disks that end on a Lagrangian brane on the Quintic. A second class of examples does not have preferred nearly massless deformations and different families of hypersurfaces can be used to calculate the same on-shell superpotential. We calculate examples of superpotentials for branes in Calabi-Yau manifolds with several moduli. The on-shell superpotentials are mapped to the mirror A-model to study the instanton expansion and to obtain predictions for disk invariants. The combined deformation spaces are equivalent to the quantum corrected Kaehler deformation spaces of certain non compact Calabi-Yau fourfolds. These fourfolds are fibrations of Calabi-Yau threefolds

  5. Mirror symmetry in the presence of branes

    International Nuclear Information System (INIS)

    Mertens, Adrian

    2011-01-01

    This work deals with mirror symmetry for N=1 compactifications on compact Calabi-Yau threefolds with branes. The mayor tool is a combined deformation space for the Calabi-Yau and a hypersurface within it. Periods of this deformation space contain information about B-type branes within the hypersurface in addition to the usual closed string data. To study these periods we generalize techniques used in closed string mirror symmetry. We derive the Picard-Fuchs system and encode the information in extended toric polytopes. Solutions of the Picard-Fuchs equations give superpotentials for certain brane configurations. This is an efficient way to calculate superpotentials. The deformations we consider are massive for all branes with non trivial superpotential. Depending on a choice of a family of hypersurfaces, the superpotential of the effective low energy theory depends on different massive fields. A priori there is no reason for these fields to be lighter then other fields that are not included. We find however examples where the superpotential is nearly at. In these examples we use the Gauss-Manin connection on the combined deformation space to define an open string mirror map. We find instanton generated superpotentials of A-type branes. This gives predictions for Ooguri-Vafa invariants counting holomorphic disks that end on a Lagrangian brane on the Quintic. A second class of examples does not have preferred nearly massless deformations and different families of hypersurfaces can be used to calculate the same on-shell superpotential. We calculate examples of superpotentials for branes in Calabi-Yau manifolds with several moduli. The on-shell superpotentials are mapped to the mirror A-model to study the instanton expansion and to obtain predictions for disk invariants. The combined deformation spaces are equivalent to the quantum corrected Kaehler deformation spaces of certain non compact Calabi-Yau fourfolds. These fourfolds are fibrations of Calabi-Yau threefolds

  6. Piezoelectric MEMS: Ferroelectric thin films for MEMS applications

    Science.gov (United States)

    Kanno, Isaku

    2018-04-01

    In recent years, piezoelectric microelectromechanical systems (MEMS) have attracted attention as next-generation functional microdevices. Typical applications of piezoelectric MEMS are micropumps for inkjet heads or micro-gyrosensors, which are composed of piezoelectric Pb(Zr,Ti)O3 (PZT) thin films and have already been commercialized. In addition, piezoelectric vibration energy harvesters (PVEHs), which are regarded as one of the key devices for Internet of Things (IoT)-related technologies, are promising future applications of piezoelectric MEMS. Significant features of piezoelectric MEMS are their simple structure and high energy conversion efficiency between mechanical and electrical domains even on the microscale. The device performance strongly depends on the function of the piezoelectric thin films, especially on their transverse piezoelectric properties, indicating that the deposition of high-quality piezoelectric thin films is a crucial technology for piezoelectric MEMS. On the other hand, although the difficulty in measuring the precise piezoelectric coefficients of thin films is a serious obstacle in the research and development of piezoelectric thin films, a simple unimorph cantilever measurement method has been proposed to obtain precise values of the direct or converse transverse piezoelectric coefficient of thin films, and recently this method has become to be the standardized testing method. In this article, I will introduce fundamental technologies of piezoelectric thin films and related microdevices, especially focusing on the deposition of PZT thin films and evaluation methods for their transverse piezoelectric properties.

  7. Mirror Neurons and Mirror-Touch Synesthesia.

    Science.gov (United States)

    Linkovski, Omer; Katzin, Naama; Salti, Moti

    2016-05-30

    Since mirror neurons were introduced to the neuroscientific community more than 20 years ago, they have become an elegant and intuitive account for different cognitive mechanisms (e.g., empathy, goal understanding) and conditions (e.g., autism spectrum disorders). Recently, mirror neurons were suggested to be the mechanism underlying a specific type of synesthesia. Mirror-touch synesthesia is a phenomenon in which individuals experience somatosensory sensations when seeing someone else being touched. Appealing as it is, careful delineation is required when applying this mechanism. Using the mirror-touch synesthesia case, we put forward theoretical and methodological issues that should be addressed before relying on the mirror-neurons account. © The Author(s) 2016.

  8. CMOS MEMS Fabrication Technologies and Devices

    Directory of Open Access Journals (Sweden)

    Hongwei Qu

    2016-01-01

    Full Text Available This paper reviews CMOS (complementary metal-oxide-semiconductor MEMS (micro-electro-mechanical systems fabrication technologies and enabled micro devices of various sensors and actuators. The technologies are classified based on the sequence of the fabrication of CMOS circuitry and MEMS elements, while SOI (silicon-on-insulator CMOS MEMS are introduced separately. Introduction of associated devices follows the description of the respective CMOS MEMS technologies. Due to the vast array of CMOS MEMS devices, this review focuses only on the most typical MEMS sensors and actuators including pressure sensors, inertial sensors, frequency reference devices and actuators utilizing different physics effects and the fabrication processes introduced. Moreover, the incorporation of MEMS and CMOS is limited to monolithic integration, meaning wafer-bonding-based stacking and other integration approaches, despite their advantages, are excluded from the discussion. Both competitive industrial products and state-of-the-art research results on CMOS MEMS are covered.

  9. 2D MEMS scanner integrating a position feedback

    Directory of Open Access Journals (Sweden)

    Lani Sebastien

    2015-01-01

    Full Text Available An integrated position sensor for a dual-axis electromagnetic tilting mirror is presented. This tilting mirror is composed of a silicon based mirror directly assembled on a silicon membrane supported by flexible beams. The position sensors are constituted by 4 Wheatstone bridges of piezoresistors which are fabricated by doping locally the flexible beams. A permanent magnet is attached to the membrane and the scanner is mounted above planar coils deposited on a ceramic substrate to achieve electromagnetic actuation. The performances of the piezoresistive sensors are evaluated by measuring the output signal of the piezoresistors as a function of the tilt of the mirror and the temperature. White light interferometry was performed for all measurement to measure the exact tilt angle. The minimum detectable angle with such sensors was 30μrad (around 13bits in the range of the minimum resolution of the interferometer. The tilt reproducibility was 0.0186%, obtained by measuring the tilt after repeated actuations with a coil current of 50mA during 30 min and the stability over time was 0.05% in 1h without actuation. The maximum measured tilt angle was 6° (mechanical limited by nonlinearity of the MEMS system.

  10. Topological mirror superconductivity.

    Science.gov (United States)

    Zhang, Fan; Kane, C L; Mele, E J

    2013-08-02

    We demonstrate the existence of topological superconductors (SCs) protected by mirror and time-reversal symmetries. D-dimensional (D=1, 2, 3) crystalline SCs are characterized by 2(D-1) independent integer topological invariants, which take the form of mirror Berry phases. These invariants determine the distribution of Majorana modes on a mirror symmetric boundary. The parity of total mirror Berry phase is the Z(2) index of a class DIII SC, implying that a DIII topological SC with a mirror line must also be a topological mirror SC but not vice versa and that a DIII SC with a mirror plane is always time-reversal trivial but can be mirror topological. We introduce representative models and suggest experimental signatures in feasible systems. Advances in quantum computing, the case for nodal SCs, the case for class D, and topological SCs protected by rotational symmetries are pointed out.

  11. MEMS Reliability Assurance Activities at JPL

    Science.gov (United States)

    Kayali, S.; Lawton, R.; Stark, B.

    2000-01-01

    An overview of Microelectromechanical Systems (MEMS) reliability assurance and qualification activities at JPL is presented along with the a discussion of characterization of MEMS structures implemented on single crystal silicon, polycrystalline silicon, CMOS, and LIGA processes. Additionally, common failure modes and mechanisms affecting MEMS structures, including radiation effects, are discussed. Common reliability and qualification practices contained in the MEMS Reliability Assurance Guideline are also presented.

  12. Modeling nonlinearities in MEMS oscillators.

    Science.gov (United States)

    Agrawal, Deepak K; Woodhouse, Jim; Seshia, Ashwin A

    2013-08-01

    We present a mathematical model of a microelectromechanical system (MEMS) oscillator that integrates the nonlinearities of the MEMS resonator and the oscillator circuitry in a single numerical modeling environment. This is achieved by transforming the conventional nonlinear mechanical model into the electrical domain while simultaneously considering the prominent nonlinearities of the resonator. The proposed nonlinear electrical model is validated by comparing the simulated amplitude-frequency response with measurements on an open-loop electrically addressed flexural silicon MEMS resonator driven to large motional amplitudes. Next, the essential nonlinearities in the oscillator circuit are investigated and a mathematical model of a MEMS oscillator is proposed that integrates the nonlinearities of the resonator. The concept is illustrated for MEMS transimpedance-amplifier- based square-wave and sine-wave oscillators. Closed-form expressions of steady-state output power and output frequency are derived for both oscillator models and compared with experimental and simulation results, with a good match in the predicted trends in all three cases.

  13. Structured synthesis of MEMS using evolutionary approaches

    DEFF Research Database (Denmark)

    Fan, Zhun; Wang, Jiachuan; Achiche, Sofiane

    2008-01-01

    In this paper, we discuss the hierarchy that is involved in a typical MEMS design and how evolutionary approaches can be used to automate the hierarchical synthesis process for MEMS. The paper first introduces the flow of a structured MEMS design process and emphasizes that system-level lumped...

  14. A six degrees of freedom mems manipulator

    NARCIS (Netherlands)

    de Jong, B.R.

    2006-01-01

    This thesis reports about a six degrees of freedom (DOF) precision manipulator in MEMS, concerning concept generation for the manipulator followed by design and fabrication (of parts) of the proposed manipulation concept in MEMS. Researching the abilities of 6 DOF precision manipulation in MEMS is

  15. Electrostatic MEMS devices with high reliability

    Science.gov (United States)

    Goldsmith, Charles L; Auciello, Orlando H; Sumant, Anirudha V; Mancini, Derrick C; Gudeman, Chris; Sampath, Suresh; Carlilse, John A; Carpick, Robert W; Hwang, James

    2015-02-24

    The present invention provides for an electrostatic microelectromechanical (MEMS) device comprising a dielectric layer separating a first conductor and a second conductor. The first conductor is moveable towards the second conductor, when a voltage is applied to the MEMS device. The dielectric layer recovers from dielectric charging failure almost immediately upon removal of the voltage from the MEMS device.

  16. H∞ Robust Control of a Large-Piston MEMS Micromirror for Compact Fourier Transform Spectrometer Systems

    Directory of Open Access Journals (Sweden)

    Huipeng Chen

    2018-02-01

    Full Text Available Incorporating linear-scanning micro-electro-mechanical systems (MEMS micromirrors into Fourier transform spectral acquisition systems can greatly reduce the size of the spectrometer equipment, making portable Fourier transform spectrometers (FTS possible. How to minimize the tilting of the MEMS mirror plate during its large linear scan is a major problem in this application. In this work, an FTS system has been constructed based on a biaxial MEMS micromirror with a large-piston displacement of 180 μm, and a biaxial H∞ robust controller is designed. Compared with open-loop control and proportional-integral-derivative (PID closed-loop control, H∞ robust control has good stability and robustness. The experimental results show that the stable scanning displacement reaches 110.9 μm under the H∞ robust control, and the tilting angle of the MEMS mirror plate in that full scanning range falls within ±0.0014°. Without control, the FTS system cannot generate meaningful spectra. In contrast, the FTS yields a clean spectrum with a full width at half maximum (FWHM spectral linewidth of 96 cm−1 under the H∞ robust control. Moreover, the FTS system can maintain good stability and robustness under various driving conditions.

  17. H∞ Robust Control of a Large-Piston MEMS Micromirror for Compact Fourier Transform Spectrometer Systems.

    Science.gov (United States)

    Chen, Huipeng; Li, Mengyuan; Zhang, Yi; Xie, Huikai; Chen, Chang; Peng, Zhangming; Su, Shaohui

    2018-02-08

    Incorporating linear-scanning micro-electro-mechanical systems (MEMS) micromirrors into Fourier transform spectral acquisition systems can greatly reduce the size of the spectrometer equipment, making portable Fourier transform spectrometers (FTS) possible. How to minimize the tilting of the MEMS mirror plate during its large linear scan is a major problem in this application. In this work, an FTS system has been constructed based on a biaxial MEMS micromirror with a large-piston displacement of 180 μm, and a biaxial H∞ robust controller is designed. Compared with open-loop control and proportional-integral-derivative (PID) closed-loop control, H∞ robust control has good stability and robustness. The experimental results show that the stable scanning displacement reaches 110.9 μm under the H∞ robust control, and the tilting angle of the MEMS mirror plate in that full scanning range falls within ±0.0014°. Without control, the FTS system cannot generate meaningful spectra. In contrast, the FTS yields a clean spectrum with a full width at half maximum (FWHM) spectral linewidth of 96 cm -1 under the H∞ robust control. Moreover, the FTS system can maintain good stability and robustness under various driving conditions.

  18. Mirror machine reactors

    International Nuclear Information System (INIS)

    Carlson, G.A.; Moir, R.W.

    1976-01-01

    Recent mirror reactor conceptual design studies are described. Considered in detail is the design of ''standard'' Yin-Yang fusion power reactors with classical and enhanced confinement. It is shown that to be economically competitive with estimates for other future energy sources, mirror reactors require a considerable increase in Q, or major design simplifications, or preferably both. These improvements may require a departure from the ''standard'' configuration. Two attractive possibilities, both of which would use much of the same physics and technology as the ''standard'' mirror, are the field reversed mirror and the end-stoppered mirror

  19. The mirror neuron system.

    Science.gov (United States)

    Cattaneo, Luigi; Rizzolatti, Giacomo

    2009-05-01

    Mirror neurons are a class of neurons, originally discovered in the premotor cortex of monkeys, that discharge both when individuals perform a given motor act and when they observe others perform that same motor act. Ample evidence demonstrates the existence of a cortical network with the properties of mirror neurons (mirror system) in humans. The human mirror system is involved in understanding others' actions and their intentions behind them, and it underlies mechanisms of observational learning. Herein, we will discuss the clinical implications of the mirror system.

  20. Modular packaging concept for MEMS and MOEMS

    Science.gov (United States)

    Stenchly, Vanessa; Reinert, Wolfgang; Quenzer, Hans-Joachim

    2017-11-01

    Wherever technical systems detect objects in their environment or interact with people, optical devices may play an important role. Light can be relatively easily produced and spatially and temporally modulated. Laser can project sharp images over long distances or cut materials in short distances. Depending on the wavelength an invisible scanning in near infrared for gesture recognition is possible as well as a projection of brilliant colour images. For several years, the Fraunhofer ISIT develops Opto-Packaging processes based on the viscous reshaping of glass wafers: First, hermetically sealed laser micro-mirror scanners WLP with inclined windows deflect in the central light reflex of the window out of the image area. Second, housing with lateral light exit permits hermetic sealing of edge-emitting lasers for highest reliability and durability. Such systems are currently experiencing an extremely high interest of the industry in all segments, from consumer to automotive through to materials processing. Our modular Opto-Packaging platform enables fast product developments. Housing for opto mechanical MEMS devices are equipped with inclined windows to minimize distortion, stray light and reflection losses. The hot viscous glass forming technology is also applied to functionalized substrate wafers which possess areas with high heat dissipation in addition to thermally insulating areas. Electrical contacts may be realized with metal filled vias or TGV (Through Glass Vias). The modular system reduces the development times for new, miniaturized optical systems so that manufacturers can focus on the essentials in their development, namely their product functionalities.

  1. MEMS applications in space exploration

    Science.gov (United States)

    Tang, William C.

    1997-09-01

    Space exploration in the coming century will emphasize cost effectiveness and highly focused mission objectives, which will result in frequent multiple missions that broaden the scope of space science and to validate new technologies on a timely basis. MEMS is one of the key enabling technology to create cost-effective, ultra-miniaturized, robust, and functionally focused spacecraft for both robotic and human exploration programs. Examples of MEMS devices at various stages of development include microgyroscope, microseismometer, microhygrometer, quadrupole mass spectrometer, and micropropulsion engine. These devices, when proven successful, will serve as models for developing components and systems for new-millennium spacecraft.

  2. MEMS linear and nonlinear statics and dynamics

    CERN Document Server

    Younis, Mohammad I

    2011-01-01

    MEMS Linear and Nonlinear Statics and Dynamics presents the necessary analytical and computational tools for MEMS designers to model and simulate most known MEMS devices, structures, and phenomena. This book also provides an in-depth analysis and treatment of the most common static and dynamic phenomena in MEMS that are encountered by engineers. Coverage also includes nonlinear modeling approaches to modeling various MEMS phenomena of a nonlinear nature, such as those due to electrostatic forces, squeeze-film damping, and large deflection of structures. The book also: Includes examples of nume

  3. Advancing MEMS Technology Usage through the MUMPS (Multi-User MEMS Processes) Program

    Science.gov (United States)

    Koester, D. A.; Markus, K. W.; Dhuler, V.; Mahadevan, R.; Cowen, A.

    1995-01-01

    In order to help provide access to advanced micro-electro-mechanical systems (MEMS) technologies and lower the barriers for both industry and academia, the Microelectronic Center of North Carolina (MCNC) and ARPA have developed a program which provides users with access to both MEMS processes and advanced electronic integration techniques. The four distinct aspects of this program, the multi-user MEMS processes (MUMP's), the consolidated micro-mechanical element library, smart MEMS, and the MEMS technology network are described in this paper. MUMP's is an ARPA-supported program created to provide inexpensive access to MEMS technology in a multi-user environment. It is both a proof-of-concept and educational tool that aids in the development of MEMS in the domestic community. MUMP's technologies currently include a 3-layer poly-silicon surface micromachining process and LIGA (lithography, electroforming, and injection molding) processes that provide reasonable design flexibility within set guidelines. The consolidated micromechanical element library (CaMEL) is a library of active and passive MEMS structures that can be downloaded by the MEMS community via the internet. Smart MEMS is the development of advanced electronics integration techniques for MEMS through the application of flip chip technology. The MEMS technology network (TechNet) is a menu of standard substrates and MEMS fabrication processes that can be purchased and combined to create unique process flows. TechNet provides the MEMS community greater flexibility and enhanced technology accessibility.

  4. Micro Electro-Mechanical System (MEMS) Pressure Sensor for Footwear

    Science.gov (United States)

    Kholwadwala, Deepesh K.; Rohrer, Brandon R.; Spletzer, Barry L.; Galambos, Paul C.; Wheeler, Jason W.; Hobart, Clinton G.; Givler, Richard C.

    2008-09-23

    Footwear comprises a sole and a plurality of sealed cavities contained within the sole. The sealed cavities can be incorporated as deformable containers within an elastic medium, comprising the sole. A plurality of micro electro-mechanical system (MEMS) pressure sensors are respectively contained within the sealed cavity plurality, and can be adapted to measure static and dynamic pressure within each of the sealed cavities. The pressure measurements can provide information relating to the contact pressure distribution between the sole of the footwear and the wearer's environment.

  5. Lessons learned from nanoscale specimens tested by MEMS-based apparatus

    Science.gov (United States)

    Elhebeary, Mohamed; Saif, M. Taher A.

    2017-06-01

    The last two decades were marked by the innovative synthesis of nanomaterials and devices. The success of these devices hinges on the mechanical properties of nanomaterials and an understanding of their deformation and failure mechanisms. Many novel testing techniques have been developed to test materials at small scale. This paper reviews the state-of-the-art microelectromechanical systems (MEMS) apparatus developed to characterize materials at nanoscale, and the key insights gained on structure-property relations of materials through these characterizations. Finally, new applications of MEMS in testing living materials, such as tissues and cells, for disease diagnosis and prognosis are discussed.

  6. Lessons learned from nanoscale specimens tested by MEMS-based apparatus

    International Nuclear Information System (INIS)

    Elhebeary, Mohamed; Saif, M Taher A

    2017-01-01

    The last two decades were marked by the innovative synthesis of nanomaterials and devices. The success of these devices hinges on the mechanical properties of nanomaterials and an understanding of their deformation and failure mechanisms. Many novel testing techniques have been developed to test materials at small scale. This paper reviews the state-of-the-art microelectromechanical systems (MEMS) apparatus developed to characterize materials at nanoscale, and the key insights gained on structure-property relations of materials through these characterizations. Finally, new applications of MEMS in testing living materials, such as tissues and cells, for disease diagnosis and prognosis are discussed. (topical review)

  7. MEMS based digital transform spectrometers

    Science.gov (United States)

    Geller, Yariv; Ramani, Mouli

    2005-09-01

    Earlier this year, a new breed of Spectrometers based on Micro-Electro-Mechanical-System (MEMS) engines has been introduced to the commercial market. The use of these engines combined with transform mathematics, produces powerful spectrometers at unprecedented low cost in various spectral regions.

  8. MEMS reliability: coming of age

    Science.gov (United States)

    Douglass, Michael R.

    2008-02-01

    In today's high-volume semiconductor world, one could easily take reliability for granted. As the MOEMS/MEMS industry continues to establish itself as a viable alternative to conventional manufacturing in the macro world, reliability can be of high concern. Currently, there are several emerging market opportunities in which MOEMS/MEMS is gaining a foothold. Markets such as mobile media, consumer electronics, biomedical devices, and homeland security are all showing great interest in microfabricated products. At the same time, these markets are among the most demanding when it comes to reliability assurance. To be successful, each company developing a MOEMS/MEMS device must consider reliability on an equal footing with cost, performance and manufacturability. What can this maturing industry learn from the successful development of DLP technology, air bag accelerometers and inkjet printheads? This paper discusses some basic reliability principles which any MOEMS/MEMS device development must use. Examples from the commercially successful and highly reliable Digital Micromirror Device complement the discussion.

  9. A Musical instrument in MEMS

    NARCIS (Netherlands)

    Engelen, Johannes Bernardus Charles; de Boer, Hans L.; de Boer, H.; Beekman, J.G.; Been, A.J.; Folkertsma, Gerrit Adriaan; Folkertsma, G.A.; Fortgens, L.; de Graaf, D.; Vocke, S.; Woldering, L.A.; Abelmann, Leon; Elwenspoek, Michael Curt

    In this work we describe a MEMS instrument that resonates at audible frequencies, and with which music can be made. The sounds are generated by mechanical resonators and capacitive displacement sensors. Damping by air scales unfavourably for generating audible frequencies with small devices.

  10. MEMS for Space Flight Applications

    Science.gov (United States)

    Lawton, R.

    1998-01-01

    Micro-Electrical Mechanical Systems (MEMS) are entering the stage of design and verification to demonstrate the utility of the technology for a wide range of applications including sensors and actuators for military, space, medical, industrial, consumer, automotive and instrumentation products.

  11. Small mirror fusion reactors

    International Nuclear Information System (INIS)

    Carlson, G.A.; Schultz, K.R.; Smith, A.C. Jr.

    1978-01-01

    Basic requirements for the pilot plants are that they produce a net product and that they have a potential for commercial upgrade. We have investigated a small standard mirror fusion-fission hybrid, a two-component tandem mirror hybrid, and two versions of a field-reversed mirror fusion reactor--one a steady state, single cell reactor with a neutral beam-sustained plasma, the other a moving ring field-reversed mirror where the plasma passes through a reaction chamber with no energy addition

  12. Measurement of the Earth tides with a MEMS gravimeter.

    Science.gov (United States)

    Middlemiss, R P; Samarelli, A; Paul, D J; Hough, J; Rowan, S; Hammond, G D

    2016-03-31

    The ability to measure tiny variations in the local gravitational acceleration allows, besides other applications, the detection of hidden hydrocarbon reserves, magma build-up before volcanic eruptions, and subterranean tunnels. Several technologies are available that achieve the sensitivities required for such applications (tens of microgal per hertz(1/2)): free-fall gravimeters, spring-based gravimeters, superconducting gravimeters, and atom interferometers. All of these devices can observe the Earth tides: the elastic deformation of the Earth's crust as a result of tidal forces. This is a universally predictable gravitational signal that requires both high sensitivity and high stability over timescales of several days to measure. All present gravimeters, however, have limitations of high cost (more than 100,000 US dollars) and high mass (more than 8 kilograms). Here we present a microelectromechanical system (MEMS) device with a sensitivity of 40 microgal per hertz(1/2) only a few cubic centimetres in size. We use it to measure the Earth tides, revealing the long-term stability of our instrument compared to any other MEMS device. MEMS accelerometers--found in most smart phones--can be mass-produced remarkably cheaply, but none are stable enough to be called a gravimeter. Our device has thus made the transition from accelerometer to gravimeter. The small size and low cost of this MEMS gravimeter suggests many applications in gravity mapping. For example, it could be mounted on a drone instead of low-flying aircraft for distributed land surveying and exploration, deployed to monitor volcanoes, or built into multi-pixel density-contrast imaging arrays.

  13. In-plane deeply-etched optical MEMS notch filter with high-speed tunability

    International Nuclear Information System (INIS)

    Sabry, Yasser M; Eltagoury, Yomna M; Shebl, Ahmed; Khalil, Diaa; Soliman, Mostafa; Sadek, Mohamed

    2015-01-01

    Notch filters are used in spectroscopy, multi-photon microscopy, fluorescence instrumentation, optical sensors and other life science applications. One type of notch filter is based on a fiber-coupled Fabry–Pérot cavity, which is formed by a reflector (external mirror) facing a dielectric-coated end of an optical fiber. Tailoring this kind of optical filter for different applications is possible because the external mirror has fewer mechanical and optical constraints. In this paper we present optical modeling and implementation of a fiber-coupled Fabry–Pérot filter based on dielectric-coated optical fiber inserted into a micromachined fiber groove facing a metallized micromirror, which is driven by a high-speed MEMS actuator. The optical MEMS chip is fabricated using deep reactive ion etching (DRIE) technology on a silicon on insulator wafer, where the optical axis is parallel to the substrate (in-plane) and the optical/mechanical components are self-aligned by the photolithographic process. The DRIE etching depth is 150 μm, chosen to increase the micromirror optical throughput and improving the out-of-plane stiffness of the MEMS actuator. The MEMS actuator type is closing-gap, while its quality factor is almost doubled by slotting the fixed plate. A low-finesse Fabry–Pérot interferometer is formed by the metallized surface of the micromirror and a cleaved end of a standard single-mode fiber, for characterization of the MEMS actuator stroke and resonance frequency. The actuator achieves a travel distance of 800 nm at a resonance frequency of 89.9 kHz. The notch filter characteristics were measured using an optical spectrum analyzer, and the filter exhibits a free spectral range up to 100 nm and a notch rejection ratio up to 20 dB around a wavelength of 1300 nm. The presented device provides batch processing and low-cost production of the filter. (paper)

  14. Amorphous Diamond MEMS and Sensors

    Energy Technology Data Exchange (ETDEWEB)

    SULLIVAN, JOHN P.; FRIEDMANN, THOMAS A.; ASHBY, CAROL I.; DE BOER, MAARTEN P.; SCHUBERT, W. KENT; SHUL, RANDY J.; HOHLFELDER, ROBERT J.; LAVAN, D.A.

    2002-06-01

    This report describes a new microsystems technology for the creation of microsensors and microelectromechanical systems (MEMS) using stress-free amorphous diamond (aD) films. Stress-free aD is a new material that has mechanical properties close to that of crystalline diamond, and the material is particularly promising for the development of high sensitivity microsensors and rugged and reliable MEMS. Some of the unique properties of aD include the ability to easily tailor film stress from compressive to slightly tensile, hardness and stiffness 80-90% that of crystalline diamond, very high wear resistance, a hydrophobic surface, extreme chemical inertness, chemical compatibility with silicon, controllable electrical conductivity from insulating to conducting, and biocompatibility. A variety of MEMS structures were fabricated from this material and evaluated. These structures included electrostatically-actuated comb drives, micro-tensile test structures, singly- and doubly-clamped beams, and friction and wear test structures. It was found that surface micromachined MEMS could be fabricated in this material easily and that the hydrophobic surface of the film enabled the release of structures without the need for special drying procedures or the use of applied hydrophobic coatings. Measurements using these structures revealed that aD has a Young's modulus of {approx}650 GPa, a tensile fracture strength of 8 GPa, and a fracture toughness of 8 MPa{center_dot}m {sup 1/2}. These results suggest that this material may be suitable in applications where stiction or wear is an issue. Flexural plate wave (FPW) microsensors were also fabricated from aD. These devices use membranes of aD as thin as {approx}100 nm. The performance of the aD FPW sensors was evaluated for the detection of volatile organic compounds using ethyl cellulose as the sensor coating. For comparable membrane thicknesses, the aD sensors showed better performance than silicon nitride based sensors. Greater

  15. U. S. Mirror Program

    International Nuclear Information System (INIS)

    Fowler, T.K.

    1978-01-01

    The mirror approach is now the principal alternate to the tokamak in the U.S. magnetic fusion energy program. The program is now focused on two new concepts that can obtain high values of Q, defined as the ratio of fusion power output to the neutral beam power injected to sustain the reaction. These are the tandem mirror and field reversed mirror concepts. Theoretically both concepts should be able to attain Q = 5 or more, as compared with Q approximately 1 in previous mirror designs. Success with either or both of these approaches would point the way toward fusion power plants with many attractive features. The linear geometry of mirror systems offers a distinct alternative to the toroidal tokamak. As a direct consequence of this difference in geometry, it is generally possible to build mirror systems in smaller units of modular construction that can probably be made to operate in steady-state. During the next 5 years the main mirror facilities in the U.S. will be the 2XIIB (renamed Beta II); a tandem mirror experiment caled TMX; and the Mirror Fusion Test Facility (MFTF) scheduled to be completed in 1981 at a cost of $94 million. As a background for discussing this program and mirror reactor concepts in later lectures, the current status of mirror physics will be reviewed by comparing theory and experimental data in four critical areas. These are adiabatic confinement of individual ions, electron heat losses out of the ends of the machine, the achievement of beta values of order unity; and stabilization of ''loss cone'' modes

  16. A Widely-Accessible Distributed MEMS Processing Environment. The MEMS Exchange Program

    Science.gov (United States)

    2012-10-29

    all of these patterns in advance, we made a new cost model, called the Python Code cost model, which utilizes the power of a high level programming ...document entitled “The Beginners Guide to MEMS Processing” on the MEMSNet and MEMS Exchange The MEMS Exchange Program Final Technical Report October 29...from the Government is absolutely necessary. As said The MEMS Exchange Program Final Technical Report October 29, 2012 Page 57 of 58 before

  17. Performance of lightweight large C/SiC mirror

    Science.gov (United States)

    Yui, Yukari Y.; Goto, Ken; Kaneda, Hidehiro; Katayama, Haruyoshi; Kotani, Masaki; Miyamoto, Masashi; Naitoh, Masataka; Nakagawa, Takao; Saruwatari, Hideki; Suganuma, Masahiro; Sugita, Hiroyuki; Tange, Yoshio; Utsunomiya, Shin; Yamamoto, Yasuji; Yamawaki, Toshihiko

    2017-11-01

    Very lightweight mirror will be required in the near future for both astronomical and earth science/observation missions. Silicon carbide is becoming one of the major materials applied especially to large and/or light space-borne optics, such as Herschel, GAIA, and SPICA. On the other hand, the technology of highly accurate optical measurement of large telescopes, especially in visible wavelength or cryogenic circumstances is also indispensable to realize such space-borne telescopes and hence the successful missions. We have manufactured a very lightweight Φ=800mm mirror made of carbon reinforced silicon carbide composite that can be used to evaluate the homogeneity of the mirror substrate and to master and establish the ground testing method and techniques by assembling it as the primary mirror into an optical system. All other parts of the optics model are also made of the same material as the primary mirror. The composite material was assumed to be homogeneous from the mechanical tests of samples cut out from the various areas of the 800mm mirror green-body and the cryogenic optical measurement of the mirror surface deformation of a 160mm sample mirror that is also made from the same green-body as the 800mm mirror. The circumstance and condition of the optical testing facility has been confirmed to be capable for the highly precise optical measurements of large optical systems of horizontal light axis configuration. Stitching measurement method and the algorithm for analysis of the measurement is also under study.

  18. Bronze rainbow hologram mirrors

    Science.gov (United States)

    Dawson, P.

    2006-02-01

    This project draws on holographic embossing techniques, ancient artistic conventions of bronze mirror design and modelling and casting processes to accomplish portraiture of reflection. Laser scanning, 3D computer graphics and holographic imaging are employed to enable a permanent 3D static holographic image to appear integrated with the real-time moving reflection of a viewer's face in a polished bronze disc. The disc and the figure which holds it (caryatid) are cast in bronze from a lost wax model, a technique which has been used for millennia to make personal mirrors. The Caryatid form of bronze mirror which went through many permutations in ancient Egyptian, Greece and Rome shows a plethora of expressive figure poses ranging from sleek nudes to highly embellished multifigure arrangements. The prototype of this series was made for Australian choreographer Graeme Murphy, Artistic Director of the Sydney Dance Company. Each subsequent mirror will be unique in figure and holographic imagery as arranged between artist and subject. Conceptually this project references both the modern experience of viewing mirrors retrieved from ancient tombs, which due to deterioration of the surface no longer reflect, and the functioning of Chinese Magic mirrors, which have the ability to project a predetermined image. Inspired by the metaphorical potential of these mirrors, which do not reflect the immediate reality of the viewer, this bronze hologram mirror series enables each viewer to reflect upon himself or herself observing simultaneously the holographic image and their own partially obliterated reflection.

  19. Mirror fusion reactor design

    International Nuclear Information System (INIS)

    Neef, W.S. Jr.; Carlson, G.A.

    1979-01-01

    Recent conceptual reactor designs based on mirror confinement are described. Four components of mirror reactors for which materials considerations and structural mechanics analysis must play an important role in successful design are discussed. The reactor components are: (a) first-wall and thermal conversion blanket, (b) superconducting magnets and their force restraining structure, (c) neutral beam injectors, and (d) plasma direct energy converters

  20. Miniaturized GPS/MEMS IMU integrated board

    Science.gov (United States)

    Lin, Ching-Fang (Inventor)

    2012-01-01

    This invention documents the efforts on the research and development of a miniaturized GPS/MEMS IMU integrated navigation system. A miniaturized GPS/MEMS IMU integrated navigation system is presented; Laser Dynamic Range Imager (LDRI) based alignment algorithm for space applications is discussed. Two navigation cameras are also included to measure the range and range rate which can be integrated into the GPS/MEMS IMU system to enhance the navigation solution.

  1. Wafer level packaging of MEMS

    International Nuclear Information System (INIS)

    Esashi, Masayoshi

    2008-01-01

    Wafer level packaging plays many important roles for MEMS (micro electro mechanical systems), including cost, yield and reliability. MEMS structures on silicon chips are encapsulated between bonded wafers or by surface micromachining, and electrical interconnections are made from the cavity. Bonding at the interface, such as glass–Si anodic bonding and metal-to-metal bonding, requires electrical interconnection through the lid vias in many cases. On the other hand, lateral electrical interconnections on the surface of the chip are used for bonding with intermediate melting materials, such as low melting point glass and solder. The cavity formed by surface micromachining is made using sacrificial etching, and the openings needed for the sacrificial etching are plugged using deposition sealing methods. Vacuum packaging methods and the structures for electrical feedthrough for the interconnection are discussed in this review. (topical review)

  2. Tandem mirror plasma confinement apparatus

    International Nuclear Information System (INIS)

    Fowler, T.K.

    1978-01-01

    Apparatus and method are described for confining a plasma in a center mirror cell by use of two end mirror cells as positively charged end stoppers to minimize leakage of positive particles from the ends of the center mirror cell

  3. Tandem mirror plasma confinement apparatus

    Science.gov (United States)

    Fowler, T. Kenneth

    1978-11-14

    Apparatus and method for confining a plasma in a center mirror cell by use of two end mirror cells as positively charged end stoppers to minimize leakage of positive particles from the ends of the center mirror cell.

  4. MEMS Bragg grating force sensor

    DEFF Research Database (Denmark)

    Reck, Kasper; Thomsen, Erik Vilain; Hansen, Ole

    2011-01-01

    We present modeling, design, fabrication and characterization of a new type of all-optical frequency modulated MEMS force sensor based on a mechanically amplified double clamped waveguide beam structure with integrated Bragg grating. The sensor is ideally suited for force measurements in harsh...... environments and for remote and distributed sensing and has a measured sensitivity of -14 nm/N, which is several times higher than what is obtained in conventional fiber Bragg grating force sensors. © 2011 Optical Society of America....

  5. MEMS Stirling Cooler Development Update

    Science.gov (United States)

    Moran, Matthew E.; Wesolek, Danielle

    2003-01-01

    This presentation provides an update on the effort to build and test a prototype unit of the patented MEMS Stirling cooler concept. A micro-scale regenerator has been fabricated by Polar Thermal Technologies and is currently being integrated into a Stirling cycle simulator at Johns Hopkins University Applied Physics Laboratory. A discussion of the analysis, design, assembly, and test plans for the prototype will be presented.

  6. Surface chemistry and tribology of MEMS.

    Science.gov (United States)

    Maboudian, Roya; Carraro, Carlo

    2004-01-01

    The microscopic length scale and high surface-to-volume ratio, characteristic of microelectro-mechanical systems (MEMS), dictate that surface properties are of paramount importance. This review deals with the effects of surface chemical treatments on tribological properties (adhesion, friction, and wear) of MEMS devices. After a brief review of materials and processes that are utilized in MEMS technology, the relevant tribological and chemical issues are discussed. Various MEMS microinstruments are discussed, which are commonly employed to perform adhesion, friction, and wear measurements. The effects of different surface treatments on the reported tribological properties are discussed.

  7. A variable radius mirror for imaging the exit slit of an SGM undulator beamline at the ALS

    International Nuclear Information System (INIS)

    Warwick, T.; Howells, M.

    1994-01-01

    Bendable metal mirrors have been implemented in two SGM undulator beamlines at the ALS. A piezo-electric actuator is employed to deform the mirror to image the SGM exit slit which moves longitudinally in the beamline as the grating rotates. The design and performance of these mirrors is discussed. Computed deformations and slope errors are compared to those found during optical metrology. The soft x-ray spot size produced at the experiment is shown

  8. A variable radius mirror for imaging the exit slit of an SGM undulator beamline at the ALS

    International Nuclear Information System (INIS)

    Warwick, T.; Howells, M.

    1994-07-01

    Bendable metal mirrors have been implemented in two SGM undulator beamlines at the ALS. A piezo-electric actuator is employed to deform the mirror to image the SGM exit slit which moves longitudinally in the beamline as the grating rotates. The design and performance of these mirrors is discussed. Computed deformations and slope errors are compared to those found during optical metrology. The soft x-ray spot size produced at the experiment is shown

  9. Phase-stepping optical profilometry of atom mirrors

    International Nuclear Information System (INIS)

    MacLaren, D A; Goldrein, H T; Holst, B; Allison, W

    2003-01-01

    Electrically deformed single crystal mirrors will be a vital part of a first generation of scanning helium microscope (SHeM). Optimized mirrors will be used to focus thermal energy helium atoms into a surface-sensitive, low-energy probe, with a resolution that depends upon the precise mirror shape. Here, we present surface profilometry measurements of a prototype atom mirror. A temporal phase-stepping Mach-Zender fibre interferometer is used to profile the mirror surface with an accuracy of a few tens of nanometres. Results are compared with the theory of small deflections of an elastic thin plate. Our experiments suggest that relatively simple apparatus can induce the mirror profiles required to demagnify a conventional helium source into a microprobe suitable for a SHeM. Use of elliptical boundary conditions in the clamping mechanism afford biaxial bending in the crystal whilst a simple double-electrode design is demonstrated to be capable of asymmetric control of the mirror deformation

  10. Mirror boxes and mirror mounts for photophysics beamline

    International Nuclear Information System (INIS)

    Raja Rao, P.M.; Raja Sekhar, B.N.; Das, N.C.; Khan, H.A.; Bhattacharya, S.S.; Roy, A.P.

    1996-01-01

    Photophysics beamline makes use of one metre Seya-Namioka monochromator and two toroidal mirrors in its fore optics. The first toroidal mirror (pre mirror) focuses light originating from the tangent point of the storage ring onto the entrance slit of the monochromator and second toroidal mirror (post mirror) collects light from the exit slit of the monochromator and focuses light onto the sample placed at a distance of about one metre away from the 2nd mirror. To steer light through monochromator and to focus it on the sample of 1mm x 1mm size require precision rotational and translational motion of the mirrors and this has been achieved with the help of precision mirror mounts. Since Indus-1 operates at pressures less than 10 -9 m.bar, the mirror mounts should be manipulated under similar ultra high vacuum conditions. Considering these requirements, two mirror boxes and two mirror mounts have been designed and fabricated. The coarse movements to the mirrors are imparted from outside the mirror chamber with the help of x-y tables and precision movements to the mirrors are achieved with the help of mirror mounts. The UHV compatibility and performance of the mirror mounts connected to mirror boxes under ultra high vacuum condition is evaluated. The details of the design, fabrication and performance evaluation are discussed in this report. 5 refs., 9 figs., 1 tab

  11. MEMS-based non-rotatory circumferential scanning optical probe for endoscopic optical coherence tomography

    Science.gov (United States)

    Xu, Yingshun; Singh, Janak; Siang, Teo Hui; Ramakrishna, Kotlanka; Premchandran, C. S.; Sheng, Chen Wei; Kuan, Chuah Tong; Chen, Nanguang; Olivo, Malini C.; Sheppard, Colin J. R.

    2007-07-01

    In this paper, we present a non-rotatory circumferential scanning optical probe integrated with a MEMS scanner for in vivo endoscopic optical coherence tomography (OCT). OCT is an emerging optical imaging technique that allows high resolution cross-sectional imaging of tissue microstructure. To extend its usage to endoscopic applications, a miniaturized optical probe based on Microelectromechanical Systems (MEMS) fabrication techniques is currently desired. A 3D electrothermally actuated micromirror realized using micromachining single crystal silicon (SCS) process highlights its very large angular deflection, about 45 degree, with low driving voltage for safety consideration. The micromirror is integrated with a GRIN lens into a waterproof package which is compatible with requirements for minimally invasive endoscopic procedures. To implement circumferential scanning substantially for diagnosis on certain pathological conditions, such as Barret's esophagus, the micromirror is mounted on 90 degree to optical axis of GRIN lens. 4 Bimorph actuators that are connected to the mirror on one end via supporting beams and springs are selected in this micromirror design. When actuators of the micromirror are driven by 4 channels of sinusoidal waveforms with 90 degree phase differences, beam focused by a GRIN is redirected out of the endoscope by 45 degree tilting mirror plate and achieve circumferential scanning pattern. This novel driving method making full use of very large angular deflection capability of our micromirror is totally different from previously developed or developing micromotor-like rotatory MEMS device for circumferential scanning.

  12. Classical mirror symmetry

    CERN Document Server

    Jinzenji, Masao

    2018-01-01

    This book furnishes a brief introduction to classical mirror symmetry, a term that denotes the process of computing Gromov–Witten invariants of a Calabi–Yau threefold by using the Picard–Fuchs differential equation of period integrals of its mirror Calabi–Yau threefold. The book concentrates on the best-known example, the quintic hypersurface in 4-dimensional projective space, and its mirror manifold. First, there is a brief review of the process of discovery of mirror symmetry and the striking result proposed in the celebrated paper by Candelas and his collaborators. Next, some elementary results of complex manifolds and Chern classes needed for study of mirror symmetry are explained. Then the topological sigma models, the A-model and the B-model, are introduced. The classical mirror symmetry hypothesis is explained as the equivalence between the correlation function of the A-model of a quintic hyper-surface and that of the B-model of its mirror manifold. On the B-model side, the process of construct...

  13. Challenges in the Packaging of MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Malshe, A.P.; Singh, S.B.; Eaton, W.P.; O' Neal, C.; Brown, W.D.; Miller, W.M.

    1999-03-26

    The packaging of Micro-Electro-Mechanical Systems (MEMS) is a field of great importance to anyone using or manufacturing sensors, consumer products, or military applications. Currently much work has been done in the design and fabrication of MEMS devices but insufficient research and few publications have been completed on the packaging of these devices. This is despite the fact that packaging is a very large percentage of the total cost of MEMS devices. The main difference between IC packaging and MEMS packaging is that MEMS packaging is almost always application specific and greatly affected by its environment and packaging techniques such as die handling, die attach processes, and lid sealing. Many of these aspects are directly related to the materials used in the packaging processes. MEMS devices that are functional in wafer form can be rendered inoperable after packaging. MEMS dies must be handled only from the chip sides so features on the top surface are not damaged. This eliminates most current die pick-and-place fixtures. Die attach materials are key to MEMS packaging. Using hard die attach solders can create high stresses in the MEMS devices, which can affect their operation greatly. Low-stress epoxies can be high-outgassing, which can also affect device performance. Also, a low modulus die attach can allow the die to move during ultrasonic wirebonding resulting to low wirebond strength. Another source of residual stress is the lid sealing process. Most MEMS based sensors and devices require a hermetically sealed package. This can be done by parallel seam welding the package lid, but at the cost of further induced stress on the die. Another issue of MEMS packaging is the media compatibility of the packaged device. MEMS unlike ICS often interface with their environment, which could be high pressure or corrosive. The main conclusion we can draw about MEMS packaging is that the package affects the performance and reliability of the MEMS devices. There is a

  14. Mirror plasma apparatus

    International Nuclear Information System (INIS)

    Moir, R.W.

    1981-01-01

    A mirror plasma apparatus which utilizes shielding by arc discharge to form a blanket plasma and lithium walls to reduce neutron damage to the wall of the apparatus. An embodiment involves a rotating liquid lithium blanket for a tandem mirror plasma apparatus wherein the first wall of the central mirror cell is made of liquid lithium which is spun with angular velocity great enough to keep the liquid lithium against the first material wall, a blanket plasma preventing the lithium vapor from contaminating the plasma

  15. Mesmerising mirror neurons.

    Science.gov (United States)

    Heyes, Cecilia

    2010-06-01

    Mirror neurons have been hailed as the key to understanding social cognition. I argue that three currents of thought-relating to evolution, atomism and telepathy-have magnified the perceived importance of mirror neurons. When they are understood to be a product of associative learning, rather than an adaptation for social cognition, mirror neurons are no longer mesmerising, but they continue to raise important questions about both the psychology of science and the neural bases of social cognition. Copyright 2010 Elsevier Inc. All rights reserved.

  16. Using the DP-190 glue for adhesive attachment of a large space mirror and its rim

    Science.gov (United States)

    Vlasenko, Oleg; Zverev, Alexey; Sachkov, Mikhail

    2014-07-01

    The glue DP-190 is widely used for adhesive attachment of astrositall (zerodur) lightweight large-size space astronomical mirrors (diameter of 1.7 m and more) with elements of their frames of invar. Peculiarities of physicalmechanical behavior of the glue DP-190 when exposed to the environment during the ground operation and in orbit cause instability of the reflective surface quality of mirrors. In this report we show that even a small (around 1%-5%) volumetric deformation of a cylindrical adhesive layer with a thickness of 0.8 mm between the mirror and the rim element causes significant mirrors deformation. We propose to use adhesive layer of special form that allows to reduce volumetric deformations of the glue DP-190 up to three times. Here we present results based on primary mirror tests of the WSO-UV project.

  17. A Teaching - Learning Framework for MEMS Education

    International Nuclear Information System (INIS)

    Sheeparamatti, B G; Angadi, S A; Sheeparamatti, R B; Kadadevaramath, J S

    2006-01-01

    Micro-Electro-Mechanical Systems (MEMS) technology has been identified as one of the most promising technologies in the 21st century. MEMS technology has opened up a wide array of unforeseen applications. Hence it is necessary to train the technocrats of tomorrow in this emerging field to meet the industrial/societal demands. The drive behind fostering of MEMS technology is the reduction in the cost, size, weight, and power consumption of the sensors, actuators, and associated electronics. MEMS is a multidisciplinary engineering and basic science area which includes electrical engineering, mechanical engineering, material science and biomedical engineering. Hence MEMS education needs a special approach to prepare the technocrats for a career in MEMS. The modern education methodology using computer based training systems (CBTS) with embedded modeling and simulation tools will help in this direction. The availability of computer based learning resources such as MATLAB, ANSYS/Multiphysics and rapid prototyping tools have contributed to proposition of an efficient teaching-learning framework for MEMS education presented in this paper. This paper proposes a conceptual framework for teaching/learning MEMS in the current technical education scenario

  18. Wavelength tunable MEMS VCSELs for OCT imaging

    DEFF Research Database (Denmark)

    Sahoo, Hitesh Kumar; Ansbæk, Thor; Ottaviano, Luisa

    2018-01-01

    MEMS VCSELs are one of the most promising swept source (SS) lasers for optical coherence tomography (OCT) and one of the best candidates for future integration with endoscopes, surgical probes and achieving an integrated OCT system. However, the current MEMS-based SS are processed on the III...

  19. Evolution of a MEMS Photoacoustic Chemical Sensor

    National Research Council Canada - National Science Library

    Pellegrino, Paul M; Polcawich, Ronald G

    2003-01-01

    .... Initial MEMS work is centered on fabrication of a lead zirconate titanate (PZT) microphone subsystem to be incorporated in the full photoacoustic device. Preliminary results were very positive for the macro-photoacoustic cell, PZT membrane microphones design / fabrication and elementary monolithic MEMS photoacoustic cavity.

  20. MEMS-Based Waste Vibrational Energy Harvesters

    Science.gov (United States)

    2013-06-01

    MEMS energy- harvesting device. Although PZT is used more prevalently due to its higher piezoelectric coefficient and dielectric constant, AlN has...7 1. Lead Zirconium Titanate ( PZT ) .........................................................7 2. Aluminum...Laboratory PiezoMUMPS Piezoelectric Multi-User MEMS Processes PZT Lead Zirconate Titanate SEM Scanning Electron Microscopy SiO2 Silicon

  1. The Micronium-A Musical MEMS instrument

    NARCIS (Netherlands)

    Engelen, Johannes Bernardus Charles; de Boer, Hans L.; de Boer, Hylco; Beekman, Jethro G.; Fortgens, Laurens C.; de Graaf, Derk B.; Vocke, Sander; Abelmann, Leon

    The Micronium is a musical instrument fabricated from silicon using microelectromechanical system (MEMS) technology. It is—to the best of our knowledge—the first musical micro-instrument fabricated using MEMS technology, where the actual sound is generated by mechanical microstructures. The

  2. Manufacturing parabolic mirrors

    CERN Multimedia

    CERN PhotoLab

    1975-01-01

    The photo shows the construction of a vertical centrifuge mounted on an air cushion, with a precision of 1/10000 during rotation, used for the manufacture of very high=precision parabolic mirrors. (See Annual Report 1974.)

  3. Mirror reactor surface study

    Energy Technology Data Exchange (ETDEWEB)

    Hunt, A. L.; Damm, C. C.; Futch, A. H.; Hiskes, J. R.; Meisenheimer, R. G.; Moir, R. W.; Simonen, T. C.; Stallard, B. W.; Taylor, C. E.

    1976-09-01

    A general survey is presented of surface-related phenomena associated with the following mirror reactor elements: plasma first wall, ion sources, neutral beams, director converters, vacuum systems, and plasma diagnostics. A discussion of surface phenomena in possible abnormal reactor operation is included. Several studies which appear to merit immediate attention and which are essential to the development of mirror reactors are abstracted from the list of recommended areas for surface work. The appendix contains a discussion of the fundamentals of particle/surface interactions. The interactions surveyed are backscattering, thermal desorption, sputtering, diffusion, particle ranges in solids, and surface spectroscopic methods. A bibliography lists references in a number of categories pertinent to mirror reactors. Several complete published and unpublished reports on surface aspects of current mirror plasma experiments and reactor developments are also included.

  4. Mirror fermions and cosmology

    International Nuclear Information System (INIS)

    Senjanovic, G.; Virginia Polytechnic Inst. and State Univ., Blacksburg

    1984-07-01

    Extended supersymmetry, Kaluza-Klein theory and family unification all suggest the existence of mirror fermions, with same quantum numbers but opposite helicities from ordinary fermions. The laboratory and especially cosmological implications of such particles are reviewed and summarized. (author)

  5. Mirror reactor surface study

    International Nuclear Information System (INIS)

    Hunt, A.L.; Damm, C.C.; Futch, A.H.; Hiskes, J.R.; Meisenheimer, R.G.; Moir, R.W.; Simonen, T.C.; Stallard, B.W.; Taylor, C.E.

    1976-01-01

    A general survey is presented of surface-related phenomena associated with the following mirror reactor elements: plasma first wall, ion sources, neutral beams, director converters, vacuum systems, and plasma diagnostics. A discussion of surface phenomena in possible abnormal reactor operation is included. Several studies which appear to merit immediate attention and which are essential to the development of mirror reactors are abstracted from the list of recommended areas for surface work. The appendix contains a discussion of the fundamentals of particle/surface interactions. The interactions surveyed are backscattering, thermal desorption, sputtering, diffusion, particle ranges in solids, and surface spectroscopic methods. A bibliography lists references in a number of categories pertinent to mirror reactors. Several complete published and unpublished reports on surface aspects of current mirror plasma experiments and reactor developments are also included

  6. The obsidian mirror The obsidian mirror

    Directory of Open Access Journals (Sweden)

    Maria do Socorro Reis Amorin

    2008-04-01

    Full Text Available The author James Norman is an American who has always lived in Mexico during the summer. He seems to love Mexican - Indian traditions and he is well acquainted with the pre-historic culture as it is shown in his book: "The Obsidian Mirror". "The Obsidian Mirror" is a mysterious story about an archeologist: Quigley that lives in a small village in Mexico-San Marcos. He is searching for antiques that belong to some tribes of pre-historic Indians in order to find out their mysteries. Quigley becomes so engaged in his work that his mind has reached a stage that is impossible to separate between Quigley the archeologist, and Quigley as an ancient Indian. The culture, the myth, the sensation of Omen - characteristics of the Indians are within himself. As a result, Quigley acts sometimes as a real Indian. The author James Norman is an American who has always lived in Mexico during the summer. He seems to love Mexican - Indian traditions and he is well acquainted with the pre-historic culture as it is shown in his book: "The Obsidian Mirror". "The Obsidian Mirror" is a mysterious story about an archeologist: Quigley that lives in a small village in Mexico-San Marcos. He is searching for antiques that belong to some tribes of pre-historic Indians in order to find out their mysteries. Quigley becomes so engaged in his work that his mind has reached a stage that is impossible to separate between Quigley the archeologist, and Quigley as an ancient Indian. The culture, the myth, the sensation of Omen - characteristics of the Indians are within himself. As a result, Quigley acts sometimes as a real Indian.

  7. A novel technique for die-level post-processing of released optical MEMS

    International Nuclear Information System (INIS)

    Elsayed, Mohannad Y; Beaulieu, Philippe-Olivier; Briere, Jonathan; Ménard, Michaël; Nabki, Frederic

    2016-01-01

    This work presents a novel die-level post-processing technique for dies including released movable structures. The procedure was applied to microelectromechanical systems (MEMS) chips that were fabricated in a commercial process, SOIMUMPs from MEMSCAP. It allows the performance of a clean DRIE etch of sidewalls on the diced chips enabling the optical testing of the pre-released MEMS mirrors through the chip edges. The etched patterns are defined by photolithography using photoresist spray coating. The photoresist thickness is tuned to create photoresist bridges over the pre-released gaps, protecting the released structures during subsequent wet processing steps. Then, the chips are subject to a sequence of wet and dry etching steps prior to dry photoresist removal in O 2 plasma. Processed micromirrors were tested and found to rotate similarly to devices without processing, demonstrating that the post-processing procedure does not affect the mechanical performance of the devices significantly. (technical note)

  8. MEMS fundamental technology and applications

    CERN Document Server

    Choudhary, Vikas

    2013-01-01

    "The book editors have managed to assemble a group of extraordinary authors to provide their expertise to this book. While giving an excellent overview of the history and the state of the art of MEMS technology, this book also focuses on current trends and topics such as gyroscopes that currently experience significant and increasing popularity in research and in industry. It is well written and the material is presented in a well-structured way making it easily accessible to any reader with a technical background."-Boris Stoeber, The University of British Columbia, Vancouver, Canada.

  9. Development of MEMS photoacoustic spectroscopy

    Energy Technology Data Exchange (ETDEWEB)

    Robinson, Alex Lockwood; Eichenfield, Matthew S.; Griffin, Benjamin; Harvey, Heidi Alyssa; Nielson, Gregory N.; Okandan, Murat; Langlois, Eric; Resnick, Paul James; Shaw, Michael J.; Young, Ian; Givler, Richard C.; Reinke, Charles M.

    2014-01-01

    After years in the field, many materials suffer degradation, off-gassing, and chemical changes causing build-up of measurable chemical atmospheres. Stand-alone embedded chemical sensors are typically limited in specificity, require electrical lines, and/or calibration drift makes data reliability questionable. Along with size, these "Achilles' heels" have prevented incorporation of gas sensing into sealed, hazardous locations which would highly benefit from in-situ analysis. We report on development of an all-optical, mid-IR, fiber-optic based MEMS Photoacoustic Spectroscopy solution to address these limitations. Concurrent modeling and computational simulation are used to guide hardware design and implementation.

  10. Micro electromechanical systems (MEMS) for mechanical engineers

    Energy Technology Data Exchange (ETDEWEB)

    Lee, A. P., LLNL

    1996-11-18

    The ongoing advances in Microelectromechanical Systems (MEMS) are providing man-kind the freedom to travel to dimensional spaces never before conceivable. Advances include new fabrication processes, new materials, tailored modeling tools, new fabrication machines, systems integration, and more detailed studies of physics and surface chemistry as applied to the micro scale. In the ten years since its inauguration, MEMS technology is penetrating industries of automobile, healthcare, biotechnology, sports/entertainment, measurement systems, data storage, photonics/optics, computer, aerospace, precision instruments/robotics, and environment monitoring. It is projected that by the turn of the century, MEMS will impact every individual in the industrial world, totaling sales up to $14 billion (source: System Planning Corp.). MEMS programs in major universities have spawned up all over the United States, preparing the brain-power and expertise for the next wave of MEMS breakthroughs. It should be pointed out that although MEMS has been initiated by electrical engineering researchers through the involvement of IC fabrication techniques, today it has evolved such that it requires a totally multi-disciplinary team to develop useful devices. Mechanical engineers are especially crucial to the success of MEMS development, since 90% of the physical realm involved is mechanical. Mechanical engineers are needed for the design of MEMS, the analysis of the mechanical system, the design of testing apparatus, the implementation of analytical tools, and the packaging process. Every single aspect of mechanical engineering is being utilized in the MEMS field today, however, the impact could be more substantial if more mechanical engineers are involved in the systems level designing. In this paper, an attempt is made to create the pathways for a mechanical engineer to enter in the MEMS field. Examples of application in optics and medical devices will be used to illustrate how mechanical

  11. Influence of Layup Sequence on the Surface Accuracy of Carbon Fiber Composite Space Mirrors

    Science.gov (United States)

    Yang, Zhiyong; Liu, Qingnian; Zhang, Boming; Xu, Liang; Tang, Zhanwen; Xie, Yongjie

    2018-04-01

    Layup sequence is directly related to stiffness and deformation resistance of the composite space mirror, and error caused by layup sequence can affect the surface precision of composite mirrors evidently. Variation of layup sequence with the same total thickness of composite space mirror changes surface form of the composite mirror, which is the focus of our study. In our research, the influence of varied quasi-isotropic stacking sequences and random angular deviation on the surface accuracy of composite space mirrors was investigated through finite element analyses (FEA). We established a simulation model for the studied concave mirror with 500 mm diameter, essential factors of layup sequences and random angular deviations on different plies were discussed. Five guiding findings were described in this study. Increasing total plies, optimizing stacking sequence and keeping consistency of ply alignment in ply placement are effective to improve surface accuracy of composite mirror.

  12. Optical inspection of hidden MEMS structures

    Science.gov (United States)

    Krauter, Johann; Gronle, Marc; Osten, Wolfgang

    2017-06-01

    Micro-electro-mechanical system's (MEMS) applications have greatly expanded over the recent years, and the MEMS industry has grown almost exponentially. One of the strongest drivers are the automotive and consumer markets. A 100% test is necessary especially in the production of automotive MEMS sensors since they are subject to safety relevant functions. This inspection should be carried out before dicing and packaging since more than 90% of the production costs are incurred during these steps. An electrical test is currently being carried out with each MEMS component. In the case of a malfunction, the defect can not be located on the wafer because the MEMS are no longer optically accessible due to the encapsulation. This paper presents a low coherence interferometer for the topography measurement of MEMS structures located within the wafer stack. Here, a high axial and lateral resolution is necessary to identify defects such as stuck or bent MEMS fingers. First, the boundary conditions for an optical inspection system will be discussed. The setup is then shown with some exemplary measurements.

  13. Design of Surface micromachined Compliant MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Bradley, Joe Anthony [Iowa State Univ., Ames, IA (United States)

    2001-01-01

    The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a micro-compliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMS, most have used comb-drive actuation methods and bulk micromachining processes. This research focuses on fully-compliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms.

  14. Design of Surface Micromachined Compliant MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Bradley, Joe Anthony [Iowa State Univ., Ames, IA (United States)

    2002-12-31

    The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a micro-compliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMs, most have used comb-drive actuation methods and bulk micromachining processes. This research focused on fully-compliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms.

  15. Endoscopic optical coherence tomography with a modified microelectromechanical systems mirror for detection of bladder cancers

    Science.gov (United States)

    Xie, Tuqiang; Xie, Huikai; Fedder, Gary K.; Pan, Yingtian

    2003-11-01

    Experimental results of a modified micromachined microelectromechanical systems (MEMS) mirror for substantial enhancement of the transverse laser scanning performance of endoscopic optical coherence tomography (EOCT) are presented. Image distortion due to buckling of MEMS mirror in our previous designs was analyzed and found to be attributed to excessive internal stress of the transverse bimorph meshes. The modified MEMS mirror completely eliminates bimorph stress and the resultant buckling effect, which increases the wobbling-free angular optical actuation to greater than 37°, exceeding the transverse laser scanning requirements for EOCT and confocal endoscopy. The new optical coherence tomography (OCT) endoscope allows for two-dimensional cross-sectional imaging that covers an area of 4.2 mm × 2.8 mm (limited by scope size) and at roughly 5 frames/s instead of the previous area size of 2.9 mm × 2.8 mm and is highly suitable for noninvasive and high-resolution imaging diagnosis of epithelial lesions in vivo. EOCT images of normal rat bladders and rat bladder cancers are compared with the same cross sections acquired with conventional bench-top OCT. The results clearly demonstrate the potential of EOCT for in vivo imaging diagnosis and precise guidance for excisional biopsy of early bladder cancers.

  16. Helically linked mirror arrangement

    International Nuclear Information System (INIS)

    Ranjan, P.

    1986-08-01

    A scheme is described for helical linking of mirror sections, which endeavors to combine the better features of toroidal and mirror devices by eliminating the longitudinal loss of mirror machines, having moderately high average β and steady state operation. This scheme is aimed at a device, with closed magnetic surfaces having rotational transform for equilibrium, one or more axisymmetric straight sections for reduced radial loss, a simple geometrical axis for the links and an overall positive magnetic well depth for stability. We start by describing several other attempts at linking of mirror sections, made both in the past and the present. Then a description of our helically linked mirror scheme is given. This example has three identical straight sections connected by three sections having helical geometric axes. A theoretical analysis of the magnetic field and single-particle orbits in them leads to the conclusion that most of the passing particles would be confined in the device and they would have orbits independent of pitch angle under certain conditions. Numerical results are presented, which agree well with the theoretical results as far as passing particle orbits are concerned

  17. Physics of mirror systems

    International Nuclear Information System (INIS)

    Post, R.F.

    1982-05-01

    In recent years the emphasis in research on the magnetic mirror approach to fusion has been shifted to address what are essentially economically-motivated issues. The introduction of the Tandem Mirror idea solved in principal the problem of low Q (low fusion power gain) of mirror-based fusion systems. In order to optimize the tandem mirror idea from an economic standpoint, some important improvements have been suggested. These improvements include the thermal barrier idea of Baldwin and Logan and the axicell concept of Kesner. These new modifications introduce some special physics considerations. Among these are (1) The MHD stability properties of high energy electron components in the end cells; (2) The optimization of end-cell magnetic field configurations with the objective of minimizing equilibrium parallel currents; (3) The suppression of microstabilities by use of sloshing ion distributions. Following a brief outline of tandem mirror concepts, the above three topics are discussed, with illustrative examples taken from earlier work or from recent design studies

  18. Development, characterization and application of compact spectrometers based on MEMS with in-plane capacitive drives

    Science.gov (United States)

    Kenda, A.; Kraft, M.; Tortschanoff, A.; Scherf, Werner; Sandner, T.; Schenk, Harald; Luettjohann, Stephan; Simon, A.

    2014-05-01

    With a trend towards the use of spectroscopic systems in various fields of science and industry, there is an increasing demand for compact spectrometers. For UV/VIS to the shortwave near-infrared spectral range, compact hand-held polychromator type devices are widely used and have replaced larger conventional instruments in many applications. Still, for longer wavelengths this type of compact spectrometers is lacking suitable and affordable detector arrays. In perennial development Carinthian Tech Research AG together with the Fraunhofer Institute for Photonic Microsystems endeavor to close this gap by developing spectrometer systems based on photonic MEMS. Here, we review on two different spectrometer developments, a scanning grating spectrometer working in the NIR and a FT-spectrometer accessing the mid-IR range up to 14 μm. Both systems are using photonic MEMS devices actuated by in-plane comb drive structures. This principle allows for high mechanical amplitudes at low driving voltages but results in gratings respectively mirrors oscillating harmonically. Both systems feature special MEMS structures as well as aspects in terms of system integration which shall tease out the best possible overall performance on the basis of this technology. However, the advantages of MEMS as enabling technology for high scanning speed, miniaturization, energy efficiency, etc. are pointed out. Whereas the scanning grating spectrometer has already evolved to a product for the point of sale analysis of traditional Chinese medicine products, the purpose of the FT-spectrometer as presented is to demonstrate what is achievable in terms of performance. Current developments topics address MEMS packaging issues towards long term stability, further miniaturization and usability.

  19. Recent advancements in system design for miniaturized MEMS-based laser projectors

    Science.gov (United States)

    Scholles, M.; Frommhagen, K.; Gerwig, Ch.; Knobbe, J.; Lakner, H.; Schlebusch, D.; Schwarzenberg, M.; Vogel, U.

    2008-02-01

    Laser projection systems that use the flying spot principle and which are based on a single MEMS micro scanning mirrors are a very promising way to build ultra-compact projectors that may fit into mobile devices. First demonstrators that show the feasibility of this approach and the applicability of the micro scanning mirror developed by Fraunhofer IPMS for these systems have already been presented. However, a number of items still have to be resolved until miniaturized laser projectors are ready for the market. This contribution describes progress on several different items, each of them of major importance for laser projection systems. First of all, the overall performance of the system has been increased from VGA resolution to SVGA (800×600 pixels) with easy connection to a PC via DVI interface or by using the projector as embedded system with direct camera interface. Secondly, the degree of integration of the electronics has been enhanced by design of an application specific analog front end IC for the micro scanning mirror. It has been fabricated in a special high voltage technology and does not only allow to generate driving signals for the scanning mirror with amplitudes of up to 200V but also integrates position detection of the mirror by several methods. Thirdly, first results concerning Speckle reduction have been achieved, which is necessary for generation of images with high quality. Other aspects include laser modulation and solutions regarding projection on tilted screens which is possible because of the unlimited depth of focus.

  20. Thermal-mechanical behavior of high precision composite mirrors

    Science.gov (United States)

    Kuo, C. P.; Lou, M. C.; Rapp, D.

    1993-01-01

    Composite mirror panels were designed, constructed, analyzed, and tested in the framework of a NASA precision segmented reflector task. The deformations of the reflector surface during the exposure to space enviroments were predicted using a finite element model. The composite mirror panels have graphite-epoxy or graphite-cyanate facesheets, separated by an aluminum or a composite honeycomb core. It is pointed out that in order to carry out detailed modeling of composite mirrors with high accuracy, it is necessary to have temperature dependent properties of the materials involved and the type and magnitude of manufacturing errors and material nonuniformities. The structural modeling and analysis efforts addressed the impact of key design and materials parameters on the performance of mirrors.

  1. Thermal-mechanical behavior of high precision composite mirrors

    Energy Technology Data Exchange (ETDEWEB)

    Kuo, C.P.; Lou, M.C.; Rapp, D.

    1993-01-01

    Composite mirror panels were designed, constructed, analyzed, and tested in the framework of a NASA precision segmented reflector task. The deformations of the reflector surface during the exposure to space enviroments were predicted using a finite element model. The composite mirror panels have graphite-epoxy or graphite-cyanate facesheets, separated by an aluminum or a composite honeycomb core. It is pointed out that in order to carry out detailed modeling of composite mirrors with high accuracy, it is necessary to have temperature dependent properties of the materials involved and the type and magnitude of manufacturing errors and material nonuniformities. The structural modeling and analysis efforts addressed the impact of key design and materials parameters on the performance of mirrors. 4 refs.

  2. Adhesion aspects in MEMS/NEMS

    CERN Document Server

    Kim, Seong H; Mittal, Kash L

    2012-01-01

    Phenomena associated with the adhesion interaction of surfaces have been a critical aspect of micro- and nanosystem development and performance since the first MicroElectroMechanicalSystems(MEMS) were fabricated. These phenomena are ubiquitous in nature and are present in all systems, however MEMS devices are particularly sensitive to their effects owing to their small size and limited actuation force that can be generated. Extension of MEMS technology concepts to the nanoscale and development of NanoElectroMechanicalSystems(NEMS) will result in systems even more strongly influenced by surface

  3. Practical guide to RF-MEMS

    CERN Document Server

    Iannacci, Jacopo

    2013-01-01

    Closes the gap between hardcore-theoretical and purely experimental RF-MEMS books. The book covers, from a practical viewpoint, the most critical steps that have to be taken in order to develop novel RF-MEMS device concepts. Prototypical RF-MEMS devices, both including lumped components and complex networks, are presented at the beginning of the book as reference examples, and these are then discussed from different perspectives with regard to design, simulation, packaging, testing, and post-fabrication modeling. Theoretical concepts are introduced when necessary to complement the practical

  4. A Conceptual Mirror

    DEFF Research Database (Denmark)

    Badie, Farshad

    2017-01-01

    The multilevel interactions between a mentor and her/his learner could exchange various conceptions between them that are supported by their own conceptualisations. Producing the own realisation of a world and developing it in the context of interactions could be said to be the most valuable prod...... will analyse the logical dependencies between learner and men- tor and will check their reflectional symmetrical relationship in a conceptual mirror. The conceptual mirror is a phenomenon that represents the meeting point of the mentor’s and the learner’s conceptual knowledge....

  5. MEMS Gyroscope with Interferometric Detection, Phase II

    Data.gov (United States)

    National Aeronautics and Space Administration — The proposed innovation is a novel MEMS gyroscope that uses micro-interferometric detection to measure the motion of the proof mass. Using an interferometric...

  6. Wireless MEMs BioSensor, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — Crossfield is proposing to develop a low cost, single chip plant bio-monitor using an embedded MEMs based infrared (IR) spectroscopy gas sensor for carbon dioxide...

  7. MEMS and Nano-Technology Clean Room

    Data.gov (United States)

    Federal Laboratory Consortium — The MEMS and Nano-Technology Clean Room is a state-of-the-art, 800 square foot, Class 1000-capable facility used for development of micro and sub-micro scale sensors...

  8. Advanced mechatronics and MEMS devices II

    CERN Document Server

    Wei, Bin

    2017-01-01

    This book introduces the state-of-the-art technologies in mechatronics, robotics, and MEMS devices in order to improve their methodologies. It provides a follow-up to "Advanced Mechatronics and MEMS Devices" (2013) with an exploration of the most up-to-date technologies and their applications, shown through examples that give readers insights and lessons learned from actual projects. Researchers on mechatronics, robotics, and MEMS as well as graduate students in mechanical engineering will find chapters on: Fundamental design and working principles on MEMS accelerometers Innovative mobile technologies Force/tactile sensors development Control schemes for reconfigurable robotic systems Inertial microfluidics Piezoelectric force sensors and dynamic calibration techniques ...And more. Authors explore applications in the areas of agriculture, biomedicine, advanced manufacturing, and space. Micro-assembly for current and future industries is also considered, as well as the design and development of micro and intel...

  9. Fractal Structures For Mems Variable Capacitors

    KAUST Repository

    Elshurafa, Amro M.; Radwan, Ahmed Gomaa Ahmed; Emira, Ahmed A.; Salama, Khaled N.

    2014-01-01

    In accordance with the present disclosure, one embodiment of a fractal variable capacitor comprises a capacitor body in a microelectromechanical system (MEMS) structure, wherein the capacitor body has an upper first metal plate with a fractal shape

  10. Nonlinear Dynamics of Electrostatically Actuated MEMS Arches

    KAUST Repository

    Al Hennawi, Qais M.

    2015-01-01

    In this thesis, we present theoretical and experimental investigation into the nonlinear statics and dynamics of clamped-clamped in-plane MEMS arches when excited by an electrostatic force. Theoretically, we first solve the equation of motion using

  11. Movable MEMS Devices on Flexible Silicon

    KAUST Repository

    Ahmed, Sally

    2013-01-01

    Flexible electronics have gained great attention recently. Applications such as flexible displays, artificial skin and health monitoring devices are a few examples of this technology. Looking closely at the components of these devices, although MEMS

  12. Cryogenic MEMS Pressure Sensor, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — A directly immersible cryogenic MEMS pressure sensor will be developed. Each silicon die will contain a vacuum-reference and a tent-like membrane. Offsetting thermal...

  13. MEMS Sensors and Actuators Laboratory (MSAL)

    Data.gov (United States)

    Federal Laboratory Consortium — The MEMS Sensors and Actuators Laboratory (MSAL) in the A.J. Clark School of Engineering at the University of Maryland (UMD) was established in January 2000. Our lab...

  14. Optical MEMS for chemical analysis and biomedicine

    CERN Document Server

    Jiang, Hongrui

    2016-01-01

    This book describes the current state of optical MEMS in chemical and biomedical analysis and brings together current trends and highlights topics representing the most exciting progress in recent years in the field.

  15. Active mems microbeam device for gas detection

    KAUST Repository

    Bouchaala, Adam M.; Jaber, Nizar; Younis, Mohammad I.

    2017-01-01

    Sensors and active switches for applications in gas detection and other fields are described. The devices are based on the softening and hardening nonlinear response behaviors of microelectromechanical systems (MEMS) clamped-clamped microbeams

  16. MEMS-based Circuits and Systems for Wireless Communication

    CERN Document Server

    Kaiser, Andreas

    2013-01-01

    MEMS-based Circuits and Systems for Wireless Communication provides comprehensive coverage of RF-MEMS technology from device to system level. This edited volume places emphasis on how system performance for radio frequency applications can be leveraged by Micro-Electro-Mechanical Systems (MEMS). Coverage also extends to innovative MEMS-aware radio architectures that push the potential of MEMS technology further ahead.  This work presents a broad overview of the technology from MEMS devices (mainly BAW and Si MEMS resonators) to basic circuits, such as oscillators and filters, and finally complete systems such as ultra-low-power MEMS-based radios. Contributions from leading experts around the world are organized in three parts. Part I introduces RF-MEMS technology, devices and modeling and includes a prospective outlook on ongoing developments towards Nano-Electro-Mechanical Systems (NEMS) and phononic crystals. Device properties and models are presented in a circuit oriented perspective. Part II focusses on ...

  17. Amorphous Metals and Composites as Mirrors and Mirror Assemblies

    Science.gov (United States)

    Hofmann, Douglas C. (Inventor); Davis, Gregory L. (Inventor); Agnes, Gregory S. (Inventor); Shapiro, Andrew A. (Inventor)

    2016-01-01

    A mirror or mirror assembly fabricated by molding, pressing, assembling, or depositing one or more bulk metal glass (BMG), bulk metal glass composite (BMGMC), or amorphous metal (AM) parts and where the optical surface and backing of the mirror can be fabricated without machining or polishing by utilizing the unique molding capabilities of this class of materials.

  18. Nano-tribology and materials in MEMS

    CERN Document Server

    Satyanarayana, N; Lim, Seh

    2013-01-01

    This book brings together recent developments in the areas of MEMS tribology, novel lubricants and coatings for nanotechnological applications, biomimetics in tribology and fundamentals of micro/nano-tribology. Tribology plays important roles in the functioning and durability of machines at small length scales because of the problems associated with strong surface adhesion, friction, wear etc. Recently, a number of studies have been conducted to understand tribological phenomena at nano/micro scales and many new tribological solutions for MEMS have been proposed.

  19. MEMS for pico- to micro-satellites

    OpenAIRE

    Shea, Herbert

    2009-01-01

    MEMS sensors, actuators, and sub-systems can enable an important reduction in the size and mass of spacecrafts, first by replacing larger and heavier components, then by replacing entire subsystems, and finally by enabling the microfabrication of highly integrated picosats. Very small satellites (1 to 100 kg) stand to benefit the most from MEMS technologies. These small satellites are typically used for science or technology demonstration missions, with higher risk tolerance than multi-ton te...

  20. Recent Progress in Silicon Mems Oscillators

    Science.gov (United States)

    2008-12-01

    MEMS oscillator. As shown, a MEMS resonator is connected to an IC. The reference oscillator, which is basically a transimpedance amplifier ...small size), and (3) DC bias voltage required to operate the resonators. As a result, instead of Colpitts or Pierce architecture, a transimpedence ... amplifier is typically used for sustain the oscillation. The frequency of the resonators is determined by both material properties and geometry of

  1. Digital holography for MEMS and microsystem metrology

    CERN Document Server

    Asundi, Anand

    2011-01-01

    Approaching the topic of digital holography from the practical perspective of industrial inspection, Digital Holography for MEMS and Microsystem Metrology describes the process of digital holography and its growing applications for MEMS characterization, residual stress measurement, design and evaluation, and device testing and inspection. Asundi also provides a thorough theoretical grounding that enables the reader to understand basic concepts and thus identify areas where this technique can be adopted. This combination of both practical and theoretical approach will ensure the

  2. Fabrication of integrated metallic MEMS devices

    DEFF Research Database (Denmark)

    Yalcinkaya, Arda Deniz; Ravnkilde, Jan Tue; Hansen, Ole

    2002-01-01

    A simple and complementary metal oxide semiconductor (CMOS) compatible fabrication technique for microelectromechanical (MEMS) devices is presented. The fabrication technology makes use of electroplated metal layers. Among the fabricated devices, high quality factor microresonators are characteri......A simple and complementary metal oxide semiconductor (CMOS) compatible fabrication technique for microelectromechanical (MEMS) devices is presented. The fabrication technology makes use of electroplated metal layers. Among the fabricated devices, high quality factor microresonators...

  3. Gabor-domain optical coherence microscopy with integrated dual-axis MEMS scanner for fast 3D imaging and metrology

    Science.gov (United States)

    Canavesi, Cristina; Cogliati, Andrea; Hayes, Adam; Santhanam, Anand P.; Tankam, Patrice; Rolland, Jannick P.

    2015-10-01

    Fast, robust, nondestructive 3D imaging is needed for characterization of microscopic structures in industrial and clinical applications. A custom micro-electromechanical system (MEMS)-based 2D scanner system was developed to achieve 55 kHz A-scan acquisition in a Gabor-domain optical coherence microscopy (GD-OCM) instrument with a novel multilevel GPU architecture for high-speed imaging. GD-OCM yields high-definition volumetric imaging with dynamic depth of focusing through a bio-inspired liquid lens-based microscope design, which has no moving parts and is suitable for use in a manufacturing setting or in a medical environment. A dual-axis MEMS mirror was chosen to replace two single-axis galvanometer mirrors; as a result, the astigmatism caused by the mismatch between the optical pupil and the scanning location was eliminated and a 12x reduction in volume of the scanning system was achieved. Imaging at an invariant resolution of 2 μm was demonstrated throughout a volume of 1 × 1 × 0.6 mm3, acquired in less than 2 minutes. The MEMS-based scanner resulted in improved image quality, increased robustness and lighter weight of the system - all factors that are critical for on-field deployment. A custom integrated feedback system consisting of a laser diode and a position-sensing detector was developed to investigate the impact of the resonant frequency of the MEMS and the driving signal of the scanner on the movement of the mirror. Results on the metrology of manufactured materials and characterization of tissue samples with GD-OCM are presented.

  4. Tandem mirror reactor

    International Nuclear Information System (INIS)

    Moir, R.W.; Barr, W.L.; Carlson, G.A.

    1977-01-01

    A parametric analysis and a preliminary conceptual design for a 1000 MWe Tandem Mirror Reactor (TMR) are described. The concept is sufficiently attractive to encourage further work, both for a pure fusion TMR and a low technology TMR Fusion-Fission Hybrid

  5. Mirror reactor blankets

    International Nuclear Information System (INIS)

    Lee, J.D.; Barmore, W.L.; Bender, D.J.; Doggett, J.N.; Galloway, T.R.

    1976-01-01

    The general requirements of a breeding blanket for a mirror reactor are described. The following areas are discussed: (1) facility layout and blanket maintenance, (2) heat transfer and thermal conversion system, (3) materials, (4) tritium containment and removal, and (5) nuclear performance

  6. Minimal mirror twin Higgs

    Energy Technology Data Exchange (ETDEWEB)

    Barbieri, Riccardo [Institute of Theoretical Studies, ETH Zurich,CH-8092 Zurich (Switzerland); Scuola Normale Superiore,Piazza dei Cavalieri 7, 56126 Pisa (Italy); Hall, Lawrence J.; Harigaya, Keisuke [Department of Physics, University of California,Berkeley, California 94720 (United States); Theoretical Physics Group, Lawrence Berkeley National Laboratory,Berkeley, California 94720 (United States)

    2016-11-29

    In a Mirror Twin World with a maximally symmetric Higgs sector the little hierarchy of the Standard Model can be significantly mitigated, perhaps displacing the cutoff scale above the LHC reach. We show that consistency with observations requires that the Z{sub 2} parity exchanging the Standard Model with its mirror be broken in the Yukawa couplings. A minimal such effective field theory, with this sole Z{sub 2} breaking, can generate the Z{sub 2} breaking in the Higgs sector necessary for the Twin Higgs mechanism. The theory has constrained and correlated signals in Higgs decays, direct Dark Matter Detection and Dark Radiation, all within reach of foreseen experiments, over a region of parameter space where the fine-tuning for the electroweak scale is 10-50%. For dark matter, both mirror neutrons and a variety of self-interacting mirror atoms are considered. Neutrino mass signals and the effects of a possible additional Z{sub 2} breaking from the vacuum expectation values of B−L breaking fields are also discussed.

  7. Mirror fusion--fission hybrids

    International Nuclear Information System (INIS)

    Lee, J.D.

    1978-01-01

    The fusion-fission concept and the mirror fusion-fission hybrid program are outlined. Magnetic mirror fusion drivers and blankets for hybrid reactors are discussed. Results of system analyses are presented and a reference design is described

  8. A novel piezoresistive polymer nanocomposite MEMS accelerometer

    International Nuclear Information System (INIS)

    Seena, V; Hari, K; Prajakta, S; Ramgopal Rao, V; Pratap, Rudra

    2017-01-01

    A novel polymer MEMS (micro electro mechanical systems) accelerometer with photo-patternable polymer nanocomposite as a piezoresistor is presented in this work. Polymer MEMS Accelerometer with beam thicknesses of 3.3 µ m and embedded nanocomposite piezoresistive layer having a gauge factor of 90 were fabricated. The photosensitive nanocomposite samples were prepared and characterized for analyzing the mechanical and electrical properties and thereby ensuring proper process parameters for incorporating the piezoresistive layer into the polymer MEMS accelerometer. The microfabrication process flow and unit processes followed are extremely low cost with process temperatures below 100 °C. This also opens up a new possibility for easy integration of such polymer MEMS with CMOS (complementary metal oxide semiconductor) devices and circuits. The fabricated devices were characterized using laser Doppler vibrometer (LDV) and the devices exhibited a resonant frequency of 10.8 kHz and a response sensitivity of 280 nm g −1 at resonance. The main focus of this paper is on the SU-8/CB nanocomposite piezoresistive MEMS accelerometer technology development which covers the material and the fabrication aspects of these devices. CoventorWare FEA analysis performed using the extracted material properties from the experimental characterization which are in close agreement to performance parameters of the fabricated devices is also discussed. The simulated piezoresistive polymer MEMS devices showed an acceleration sensitivity of 126 nm g −1 and 82 ppm of Δ R / R per 1 g of acceleration. (paper)

  9. Plastic deformation

    NARCIS (Netherlands)

    Sitter, de L.U.

    1937-01-01

    § 1. Plastic deformation of solid matter under high confining pressures has been insufficiently studied. Jeffreys 1) devotes a few paragraphs to deformation of solid matter as a preface to his chapter on the isostasy problem. He distinguishes two properties of solid matter with regard to its

  10. Physics of mirror fusion systems

    International Nuclear Information System (INIS)

    Post, R.F.

    1976-01-01

    Recent experimental results with the 2XIIB mirror machine at Lawrence Livermore Laboratory have demonstrated the stable confinement of plasmas at fusion temperatures and with energy densities equaling or exceeding that of the confining fields. The physics of mirror confinement is discussed in the context of these new results. Some possible approaches to further improving the confinement properties of mirror systems and the impact of these new approaches on the prospects for mirror fusion reactors are discussed

  11. Mirror fusion test facility

    International Nuclear Information System (INIS)

    Post, R.F.

    1978-01-01

    The MFTF is a large new mirror facility under construction at Livermore for completion in 1981--82. It represents a scaleup, by a factor of 50 in plasma volume, a factor of 5 or more in ion energy, and a factor of 4 in magnetic field intensity over the Livermore 2XIIB experiment. Its magnet, employing superconducting NbTi windings, is of Yin-Yang form and will weigh 200 tons. MFTF will be driven by neutral beams of two levels of current and energy: 1000 amperes of 20 keV (accelerating potential) pulsed beams for plasma startup; 750 amperes of 80 keV beams of 0.5 second duration for temperature buildup and plasma sustainment. Two operating modes for MFTF are envisaged: The first is operation as a conventional mirror cell with n/sup tau/ approximately equal to 10 12 cm -3 sec, W/sub i/ = 50 keV, where the emphasis will be on studying the physics of mirror cells, particularly the issues of improved techniques of stabilization against ion cyclotron modes and of maximization of the electron temperature. The second possible mode is the further study of the Field Reversed Mirror idea, using high current neutral beams to sustain the field-reversed state. Anticipating success in the coming Livermore Tandem Mirror Experiment (TMX) MFTF has been oriented so that it could comprise one end cell of a scaled up TM experiment. Also, if MFTF were to succeed in achieving a FR state it could serve as an essentially full-sized physics prototype of one cell of a FRM fusion power plant

  12. Mirror reactor studies

    International Nuclear Information System (INIS)

    Moir, R.W.; Barr, W.L.; Bender, D.J.

    1977-01-01

    Design studies of a fusion mirror reactor, a fusion-fission mirror reactor, and two small mirror reactors are summarized. The fusion reactor uses 150-keV neutral-beam injectors based on the acceleration of negative ions. The injectors provide over 1 GW of continuous power at an efficiency greater than 80%. The fusion reactor has three-stage, modularized, Venetian blind, plasma direct converter with a predicted efficiency of 59% and a new concept for removal of the lune-shaped blanket: a crane is brought between the two halves of the Yin-Yang magnet, which are separated by a float. The design has desirable features such as steady-state operation, minimal impurity problems, and low first-wall thermal stress. The major disadvantage is low Q resulting in high re-circulating power and hence high cost of electrical power. However, the direct capital cost per unit of gross electrical power is reasonable [$1000/kW(e)]. By contrast, the fusion-fission reactor design is not penalized by re-circulating power and uses relatively near-term fusion technology being developed for the fusion power program. New results are presented on the Th- 233 U and the U- 239 Pu fuel cycles. The purpose of this hybrid is fuel production, with projected costs at $55/g of Pu or $127/g of 233 U. Blanket and cooling system designs, including an emergency cooling system, by General Atomic Company, lead us to the opinion that the reactor can meet expected safety standards for licensing. The smallest mirror reactor having only a shield between the plasma and the coil is the 4.2-m long fusion engineering research facility (FERF) designed for material irradiation. The smallest mirror reactor having both a blanket and shield is the 7.5-m long experimental power reactor (EPR), which has both a fusion and a fusion-fission version. (author)

  13. q-deformed oscillators and D-branes on conifold

    International Nuclear Information System (INIS)

    Okuyama, Kazumi

    2009-01-01

    We study the q-deformed oscillator algebra acting on the wavefunctions of non-compact D-branes in the topological string on conifold. We find that the mirror B-model curve of conifold appears from the commutation relation of the q-deformed oscillators

  14. Review of mirror fusion reactor designs

    International Nuclear Information System (INIS)

    Bender, D.J.

    1977-01-01

    Three magnetic confinement concepts, based on the mirror principle, are described. These mirror concepts are summarized as follows: (1) fusion-fission hybrid reactor, (2) tandem mirror reactor, and (3) reversed field mirror reactor

  15. Electrostatic polymer-based microdeformable mirror for adaptive optics

    Science.gov (United States)

    Zamkotsian, Frederic; Conedera, Veronique; Granier, Hugues; Liotard, Arnaud; Lanzoni, Patrick; Salvagnac, Ludovic; Fabre, Norbert; Camon, Henri

    2007-02-01

    Future adaptive optics (AO) systems require deformable mirrors with very challenging parameters, up to 250 000 actuators and inter-actuator spacing around 500 μm. MOEMS-based devices are promising for the development of a complete generation of new deformable mirrors. Our micro-deformable mirror (MDM) is based on an array of electrostatic actuators with attachments to a continuous mirror on top. The originality of our approach lies in the elaboration of layers made of polymer materials. Mirror layers and active actuators have been demonstrated. Based on the design of this actuator and our polymer process, realization of a complete polymer-MDM has been done using two process flows: the first involves exclusively polymer materials while the second uses SU8 polymer for structural layers and SiO II and sol-gel for sacrificial layers. The latest shows a better capability in order to produce completely released structures. The electrostatic force provides a non-linear actuation, while AO systems are based on linear matrices operations. Then, we have developed a dedicated 14-bit electronics in order to "linearize" the actuation, using a calibration and a sixth-order polynomial fitting strategy. The response is nearly perfect over our 3×3 MDM prototype with a standard deviation of 3.5 nm; the influence function of the central actuator has been measured. First evaluation on the cross non-linarities has also been studied on OKO mirror and a simple look-up table is sufficient for determining the location of each actuator whatever the locations of the neighbor actuators. Electrostatic MDM are particularly well suited for open-loop AO applications.

  16. Characterizing time-dependent mechanics in metallic MEMS

    Directory of Open Access Journals (Sweden)

    Geers M.G.D.

    2010-06-01

    Full Text Available Experiments for characterization of time-dependent material properties in free-standing metallic microelectromechanical system (MEMS pose challenges: e.g. fabrication and handling (sub-μm sized specimens, control and measurement of sub-μN loads and sub-μm displacements over long periods and various temperatures [1]. A variety of experimental setups have been reported each having their pros and cons. One example is a micro-tensile tester with an ingenious electro-static specimen gripping system [2] aiding simple specimen design giving good results at μN and sub-μm levels, but without in-situ full-field observations. Other progressive examples assimilate the specimen, MEMS actuators and load cells on a single chip [3,4] yielding significant results at nN and nm levels with in-situ TEM/SEM observability, though not without complications: complex load actuator/sensor calibration per chip, measures to reduce fabrication failure and unfeasible cofabrication on wafers with commercial metallic MEMS. This work aims to overcome these drawbacks by developing experimental methods with high sensitivity, precision and in-situ full-field observation capabilities. Moreover, these should be applicable to simple free-standing metallic MEMS that can be co-fabricated with commercial devices. These methods will then serve in systematic studies into size-effects in time-dependent material properties. First a numeric-experimental method is developed. It characterizes bending deformation of onwafer μm-sized aluminum cantilevers. A specially designed micro-clamp is used to mechanically apply a constant precise deflection of the beam (zres <50 nm for a prolonged period, see fig. 1. After this period, the deflection by the micro-clamp is removed. Full-field height maps with the ensuing deformation are measured over time with confocal optical profilometry (COP. This yields the tip deflection as function of time with ~3 nm precision, see fig.2. To extract material

  17. Mirror image agnosia.

    Science.gov (United States)

    Chandra, Sadanandavalli Retnaswami; Issac, Thomas Gregor

    2014-10-01

    Gnosis is a modality-specific ability to access semantic knowledge of an object or stimulus in the presence of normal perception. Failure of this is agnosia or disorder of recognition. It can be highly selective within a mode. self-images are different from others as none has seen one's own image except in reflection. Failure to recognize this image can be labeled as mirror image agnosia or Prosopagnosia for reflected self-image. Whereas mirror agnosia is a well-recognized situation where the person while looking at reflected images of other objects in the mirror he imagines that the objects are in fact inside the mirror and not outside. Five patients, four females, and one male presented with failure to recognize reflected self-image, resulting in patients conversing with the image as a friend, fighting because the person in mirror is wearing her nose stud, suspecting the reflected self-image to be an intruder; but did not have prosopagnosia for others faces, non living objects on self and also apraxias except dressing apraxia in one patient. This phenomena is new to our knowledge. Mirror image agnosia is an unique phenomena which is seen in patients with parietal lobe atrophy without specificity to a category of dementing illness and seems to disappear as disease advances. Reflected self-images probably have a specific neural substrate that gets affected very early in posterior dementias specially the ones which predominantly affect the right side. At that phase most patients are mistaken as suffering from psychiatric disorder as cognition is moderately preserved. As disease becomes more widespread this symptom becomes masked. A high degree of suspicion and proper assessment might help physicians to recognize the organic cause of the symptom so that early therapeutic interventions can be initiated. Further assessment of the symptom with FMRI and PET scan is likely to solve the mystery of how brain handles reflected self-images. A new observation involving failure

  18. Apparatus and process for removing a predetermined portion of reflective material from mirror

    Science.gov (United States)

    Perry, Stephen J.; Steinmetz, Lloyd L.

    1994-01-01

    An apparatus and process are disclosed for removal of a stripe of soft reflective material of uniform width from the surface of a mirror by using a blade having a large included angle to inhibit curling of the blade during the cutting operation which could result in damage to the glass substrate of the mirror. The cutting blade is maintained at a low blade angle with respect to the mirror surface to produce minimal chipping along the cut edge and to minimize the force exerted on the coating normal to the glass surface which could deform the flat mirror. The mirror is mounted in a cutting mechanism containing a movable carriage on which the blade is mounted to provide very accurate straightness of the travel of the blade along the mirror.

  19. Dynamic coherent backscattering mirror

    Energy Technology Data Exchange (ETDEWEB)

    Zeylikovich, I.; Xu, M., E-mail: mxu@fairfield.edu [Physics Department, Fairfield University, Fairfield, CT 06824 (United States)

    2016-02-15

    The phase of multiply scattered light has recently attracted considerable interest. Coherent backscattering is a striking phenomenon of multiple scattered light in which the coherence of light survives multiple scattering in a random medium and is observable in the direction space as an enhancement of the intensity of backscattered light within a cone around the retroreflection direction. Reciprocity also leads to enhancement of backscattering light in the spatial space. The random medium behaves as a reciprocity mirror which robustly converts a diverging incident beam into a converging backscattering one focusing at a conjugate spot in space. Here we first analyze theoretically this coherent backscattering mirror (CBM) phenomenon and then demonstrate the capability of CBM compensating and correcting both static and dynamic phase distortions occurring along the optical path. CBM may offer novel approaches for high speed dynamic phase corrections in optical systems and find applications in sensing and navigation.

  20. Neutral beams for mirrors

    International Nuclear Information System (INIS)

    Fink, J.H.

    1983-01-01

    An important demonstration of negative ion technology is proposed for FY92 in the MFTF-α+T, an upgrade of the Mirror Fusion Test Facility at the Lawrence Livermore National Laboratory. This facility calls for 200-keV negative ions to form neutral beams that generate sloshing ions in the reactor end plugs. Three different beam lines are considered for this application. Their advantages and disadvantages are discussed

  1. Mirror reactor studies

    International Nuclear Information System (INIS)

    Moir, R.W.; Barr, W.L.; Bender, D.J.

    1976-01-01

    Design studies of a fusion mirror reactor, a fusion-fission mirror reactor, and two small mirror reactors are summarized. The fusion reactor uses 150-keV neutral-beam injectors based on the acceleration of negative ions. The injectors provide over 1 GW of continuous power at an efficiency greater than 80 percent. The fusion reactor has three-stage, modularized, Venetian blind, plasma direct converter with a predicted efficiency of 59 percent and a new concept for removal of the lune-shaped blanket: a crane is brought between the two halves of the Yin-Yang magnet, which are separated by a float. The design has desirable features such as steady-state operation, minimal impurity problems, and low first-wall thermal stress. The major disadvantage is low Q resulting in high recirculating power and hence high cost of electrical power. However, the direct capital cost per unit of gross electrical power is reasonable [$1000/kW(e)

  2. Mirror-Image Equivalence and Interhemispheric Mirror-Image Reversal.

    Science.gov (United States)

    Corballis, Michael C

    2018-01-01

    Mirror-image confusions are common, especially in children and in some cases of neurological impairment. They can be a special impediment in activities such as reading and writing directional scripts, where mirror-image patterns (such as b and d ) must be distinguished. Treating mirror images as equivalent, though, can also be adaptive in the natural world, which carries no systematic left-right bias and where the same object or event can appear in opposite viewpoints. Mirror-image equivalence and confusion are natural consequences of a bilaterally symmetrical brain. In the course of learning, mirror-image equivalence may be established through a process of symmetrization, achieved through homotopic interhemispheric exchange in the formation of memory circuits. Such circuits would not distinguish between mirror images. Learning to discriminate mirror-image discriminations may depend either on existing brain asymmetries, or on extensive learning overriding the symmetrization process. The balance between mirror-image equivalence and mirror-image discrimination may nevertheless be precarious, with spontaneous confusions or reversals, such as mirror writing, sometimes appearing naturally or as a manifestation of conditions like dyslexia.

  3. Mirror-Image Equivalence and Interhemispheric Mirror-Image Reversal

    Directory of Open Access Journals (Sweden)

    Michael C. Corballis

    2018-04-01

    Full Text Available Mirror-image confusions are common, especially in children and in some cases of neurological impairment. They can be a special impediment in activities such as reading and writing directional scripts, where mirror-image patterns (such as b and d must be distinguished. Treating mirror images as equivalent, though, can also be adaptive in the natural world, which carries no systematic left-right bias and where the same object or event can appear in opposite viewpoints. Mirror-image equivalence and confusion are natural consequences of a bilaterally symmetrical brain. In the course of learning, mirror-image equivalence may be established through a process of symmetrization, achieved through homotopic interhemispheric exchange in the formation of memory circuits. Such circuits would not distinguish between mirror images. Learning to discriminate mirror-image discriminations may depend either on existing brain asymmetries, or on extensive learning overriding the symmetrization process. The balance between mirror-image equivalence and mirror-image discrimination may nevertheless be precarious, with spontaneous confusions or reversals, such as mirror writing, sometimes appearing naturally or as a manifestation of conditions like dyslexia.

  4. MEMS Rotary Engine Power System

    Science.gov (United States)

    Fernandez-Pello, A. Carlos; Pisano, Albert P.; Fu, Kelvin; Walther, David C.; Knobloch, Aaron; Martinez, Fabian; Senesky, Matt; Stoldt, Conrad; Maboudian, Roya; Sanders, Seth; Liepmann, Dorian

    This work presents a project overview and recent research results for the MEMS Rotary Engine Power System project at the Berkeley Sensor & Actuator Center of the University of California at Berkeley. The research motivation for the project is the high specific energy density of hydrocarbon fuels. When compared with the energy density of batteries, hydrocarbon fuels may have as much as 20x more energy. However, the technical challenge is the conversion of hydrocarbon fuel to electricity in an efficient and clean micro engine. A 12.9 mm diameter Wankel engine will be shown that has already generated 4 Watts of power at 9300rpm. In addition, the 1mm and 2.4 mm Wankel engines that BSAC is developing for power generation at the microscale will be discussed. The project goal is to develop electrical power output of 90milliwatts from the 2.4 mm engine. Prototype engine components have already been fabricated and these will be described. The integrated generator design concept utilizes a nickel-iron alloy electroplated in the engine rotor poles, so that the engine rotor also serves as the generator rotor.

  5. MEMS/MOEMS foundry services at INO

    Science.gov (United States)

    García-Blanco, Sonia; Ilias, Samir; Williamson, Fraser; Généreux, Francis; Le Noc, Loïc; Poirier, Michel; Proulx, Christian; Tremblay, Bruno; Provençal, Francis; Desroches, Yan; Caron, Jean-Sol; Larouche, Carl; Beaupré, Patrick; Fortin, Benoit; Topart, Patrice; Picard, Francis; Alain, Christine; Pope, Timothy; Jerominek, Hubert

    2010-06-01

    In the MEMS manufacturing world, the "fabless" model is getting increasing importance in recent years as a way for MEMS manufactures and startups to minimize equipment costs and initial capital investment. In order for this model to be successful, the fabless company needs to work closely with a MEMS foundry service provider. Due to the lack of standardization in MEMS processes, as opposed to CMOS microfabrication, the experience in MEMS development processes and the flexibility of the MEMS foundry are of vital importance. A multidisciplinary team together with a complete microfabrication toolset allows INO to offer unique MEMS foundry services to fabless companies looking for low to mid-volume production. Companies that benefit from their own microfabrication facilities can also be interested in INO's assistance in conducting their research and development work during periods where production runs keep their whole staff busy. Services include design, prototyping, fabrication, packaging, and testing of various MEMS and MOEMS devices on wafers fully compatible with CMOS integration. Wafer diameters ranging typically from 1 inch to 6 inches can be accepted while 8-inch wafers can be processed in some instances. Standard microfabrication techniques such as metal, dielectric, and semiconductor film deposition and etching as well as photolithographic pattern transfer are available. A stepper permits reduction of the critical dimension to around 0.4 μm. Metals deposited by vacuum deposition methods include Au, Ag, Al, Al alloys, Ti, Cr, Cu, Mo, MoCr, Ni, Pt, and V with thickness varying from 5 nm to 2 μm. Electroplating of several materials including Ni, Au and In is also available. In addition, INO has developed and built a gold black deposition facility to answer customer's needs for broadband microbolometric detectors. The gold black deposited presents specular reflectance of less than 10% in the wavelength range from 0.2 μm to 100 μm with thickness ranging from

  6. A review of vibration-based MEMS piezoelectric energy harvesters

    Energy Technology Data Exchange (ETDEWEB)

    Saadon, Salem; Sidek, Othman [Collaborative Microelectronic Design Excellence Center (CEDEC), School of Electrical and Electronic Engineering, Universiti Sains Malaysia, Engineering Campus, 14300 Nibong Tebal, Seberang Perai Selatan, Pulau Pinang (Malaysia)

    2011-01-15

    The simplicity associated with the piezoelectric micro-generators makes it very attractive for MEMS applications, especially for remote systems. In this paper we reviewed the work carried out by researchers during the last three years. The improvements in experimental results obtained in the vibration-based MEMS piezoelectric energy harvesters show very good scope for MEMS piezoelectric harvesters in the field of power MEMS in the near future. (author)

  7. INVESTIGATION OF THE STATIC AND DYNAMIC BEHAVIOR OF A MICRO MIRROR

    KAUST Repository

    Ilyas, Saad

    2014-11-01

    This dissertation presents the modeling, design, fabrication, and experimental testing of a polyimide based micro mirror for applications in MEMS logic devices based on its static behavior and in MEMS resonators using mixed frequency excitation. First, a universal MEMS logic device that can perform all the logic operations, such as INVERTER, AND, NAND, NOR, and OR gates using one physical structure, within an operating range of 0-10 volts. It can also perform XOR and XNOR with one access inverter using the same structure with different electrical interconnects. We discuss the fabrication, simulations and experimental results demonstrating these logic operations on a polyimide micro mirror. The device is capable of performing the switching operation with a frequency of 1 kHz, a switching time of 8.2 μs, and an electrical lifetime of 8000 cycles. Second, this study presents an experimental and theoretical investigation of a micro mirror under a mixed frequency signal composed of two harmonic AC sources. The experimental and theoretical dynamics are explored via frequency sweeps in the desired neighborhoods. One frequency is fixed while the other frequency is swept through a wide 5 range to study the dynamic responses of the micro mirror. These responses are studied under different frequencies and different input voltages. The results show interesting dynamics, where the system exhibits primary resonance, and combination resonances of additive and subtractive type. The mixed excitation is demonstrated as a way to increase the bandwidth of the resonator near primary resonance, which can be promising for resonant sensing applications in the effort to increase the signal-noise ratio over extended frequency range. It can be promising for energy harvesting as well; since it provides the system with resonances of very high amplitudes at very low frequencies regardless of what is the natural frequency of the system, however this still needs further investigation.

  8. A Nuclear Microbattery for MEMS Devices

    International Nuclear Information System (INIS)

    Blanchard, James; Henderson, Douglass; Lal, Amit

    2002-01-01

    This project was designed to demonstrate the feasibility of producing on-board power for MEMS devices using radioisotopes. MEMS is a fast growing field, with hopes for producing a wide variety of revolutionary applications, including ''labs on a chip,'' micromachined scanning tunneling microscopes, microscopic detectors for biological agents, microsystems for DNA identification, etc. Currently, these applications are limited by the lack of an on-board power source. Research is ongoing to study approaches such as fuel cells, fossil fuels, and chemical batteries, but all these concepts have limitations. For long-lived, high energy density applications, on-board radioisotope power offers the best choice. We have succeeded in producing such devices using a variety of isotopes, incorporation methods, and device geometries. These experiments have demonstrated the feasibility of using radioisotope power and that there are a variety of options available for MEMS designers. As an example of an integrated, self-powered application, we have created an oscillating cantilever beam that is capable of consistent, periodic oscillations over very long time periods without the need for refueling. Ongoing work will demonstrate that this cantilever is capable of radio frequency transmission, allowing MEMS devices to communicate with one another wirelessly. Thus, this will be the first self-powered wireless transmitter available for use in MEMS devices, permitting such applications as sensors embedded in buildings for continuous monitoring of the building performance and integrity

  9. Optical MEMS for earth observation payloads

    Science.gov (United States)

    Rodrigues, B.; Lobb, D. R.; Freire, M.

    2017-11-01

    An ESA study has been taken by Lusospace Ltd and Surrey Satellite Techonoly Ltd (SSTL) into the use of optical Micro Eletro-Mechanical Systems (MEMS) for earth Observation. A review and analysis was undertaken of the Micro-Optical Electro-Mechanical Systems (MOEMS) available in the market with potential application in systems for Earth Observation. A summary of this review will be presented. Following the review two space-instrument design concepts were selected for more detailed analysis. The first was the use of a MEMS device to remove cloud from Earth images. The concept is potentially of interest for any mission using imaging spectrometers. A spectrometer concept was selected and detailed design aspects and benefits evaluated. The second concept developed uses MEMS devices to control the width of entrance slits of spectrometers, to provide variable spectral resolution. This paper will present a summary of the results of the study.

  10. MEMS tunable grating micro-spectrometer

    Science.gov (United States)

    Tormen, Maurizio; Lockhart, R.; Niedermann, P.; Overstolz, T.; Hoogerwerf, A.; Mayor, J.-M.; Pierer, J.; Bosshard, C.; Ischer, R.; Voirin, G.; Stanley, R. P.

    2017-11-01

    The interest in MEMS based Micro-Spectrometers is increasing due to their potential in terms of flexibility as well as cost, low mass, small volume and power savings. This interest, especially in the Near-Infrared and Mid- Infrared, ranges from planetary exploration missions to astronomy, e.g. the search for extra solar planets, as well as to many other terrestrial fields of application such as, industrial quality and surface control, chemical analysis of soil and water, detection of chemical pollutants, exhausted gas analysis, food quality control, process control in pharmaceuticals, to name a few. A compact MEMS-based Spectrometer for Near- Infrared and Mid-InfraRed operation have been conceived, designed and demonstrated. The design based on tunable MEMS blazed grating, developed in the past at CSEM [1], achieves state of the art results in terms of spectral resolution, operational wavelength range, light throughput, overall dimensions, and power consumption.

  11. RF MEMS theory, design, and technology

    CERN Document Server

    Rebeiz, Gabriel M

    2003-01-01

    Ultrasmall Radio Frequency and Micro-wave Microelectromechanical systems (RF MEMs), such as switches, varactors, and phase shifters, exhibit nearly zero power consumption or loss. For this reason, they are being developed intensively by corporations worldwide for use in telecommunications equipment. This book acquaints readers with the basics of RF MEMs and describes how to design practical circuits and devices with them. The author, an acknowledged expert in the field, presents a range of real-world applications and shares many valuable tricks of the trade.

  12. Enabling technology for MEMS and nanodevices

    CERN Document Server

    Baltes, Henry; Fedder, Gary K; Hierold, Christofer; Korvink, Jan G; Tabata, Osamu

    2013-01-01

    This softcover edition of the eponymous volume from the successful ""Advanced Micro & Nanosystems"" series covers all aspects of fabrication of MEMS under CMOS-compatible conditions from design to implementation.It examines the various routes and methods to combine electronics generated by the CMOS technology with novel micromechanical parts into one-chip solutions. Various approaches, fundamental and technological aspects as well as strategies leading to different types of functionalities and presented in detail.For the practicing engineer as well as MSc and PhD students on MEMS cours

  13. Hermeticity testing of MEMS and microelectronic packages

    CERN Document Server

    Costello, Suzanne

    2013-01-01

    Packaging of microelectronics has been developing since the invention of the transistor in 1947. With the increasing complexity and decreasing size of the die, packaging requirements have continued to change. A step change in package requirements came with the introduction of the Micro-Electro-Mechanical System (MEMS) whereby interactions with the external environment are, in some cases, required.This resource is a rapid, definitive reference on hermetic packaging for the MEMS and microelectronics industry, giving practical guidance on traditional and newly developed test methods. This book in

  14. Applications of MEMS for Space Exploration

    Science.gov (United States)

    Tang, William C.

    1998-03-01

    Space exploration in the coming century will emphasize cost effectiveness and highly focused mission objectives, which will result in frequent multiple missions that broaden the scope of space science and to validate new technologies on a timely basis. Micro Electro Mechanical Systems (MEMS) is one of the key enabling technologies to create cost-effective, ultra-miniaturized, robust, and functionally focused spacecraft for both robotic and human exploration programs. Examples of MEMS devices at various stages of development include microgyroscope, microseismometer, microhygrometer, quadrupole mass spectrometer, and micropropulsion engine. These devices, when proven successful, will serve as models for developing components and systems for new-millennium spacecraft.

  15. Antenna Miniaturization with MEMS Tunable Capacitors

    DEFF Research Database (Denmark)

    Barrio, Samantha Caporal Del; Morris, Art; Pedersen, Gert Frølund

    2014-01-01

    In today’s mobile device market, there is a strong need for efficient antenna miniaturization. Tunable antennas are a very promising way to reduce antenna volume while enlarging its operating bandwidth. MEMS tunable capacitors are state-ofthe- art in terms of insertion loss and their characterist......In today’s mobile device market, there is a strong need for efficient antenna miniaturization. Tunable antennas are a very promising way to reduce antenna volume while enlarging its operating bandwidth. MEMS tunable capacitors are state-ofthe- art in terms of insertion loss...

  16. Mirror symmetry II

    CERN Document Server

    Greene, Brian R

    1997-01-01

    Mirror symmetry has undergone dramatic progress during the last five years. Tremendous insight has been gained on a number of key issues. This volume surveys these results. Some of the contributions in this work have appeared elsewhere, while others were written specifically for this collection. The areas covered are organized into 4 sections, and each presents papers by both physicists and mathematicians. This volume collects the most important developments that have taken place in mathematical physics since 1991. It is an essential reference tool for both mathematics and physics libraries and for students of physics and mathematics.

  17. Introduction: Mirrors of Passing

    DEFF Research Database (Denmark)

    Seebach, Sophie Hooge; Willerslev, Rane

    How is death, time, and materiality interconnected? How to approach an understanding of the world of the dead? In this introduction, we seek to understand how the experience of material decay, of the death of those around us, makes us aware of the passing of time. Through the literary lens of Neil...... Gaiman’s The Graveyard Book, we explore how the world of the dead and the world of the living can intersect; how time and materiality shifts and changes depending on who experiences it. These revelations, based on fiction, provide a mirror through which the reader can experience the varied chapters...

  18. Complex/Symplectic Mirrors

    Energy Technology Data Exchange (ETDEWEB)

    Chuang, Wu-yen; Kachru, Shamit; /Stanford U., ITP /SLAC; Tomasiello, Alessandro; /Stanford U., ITP

    2005-10-28

    We construct a class of symplectic non-Kaehler and complex non-Kaehler string theory vacua, extending and providing evidence for an earlier suggestion by Polchinski and Strominger. The class admits a mirror pairing by construction. Comparing hints from a variety of sources, including ten-dimensional supergravity and KK reduction on SU(3)-structure manifolds, suggests a picture in which string theory extends Reid's fantasy to connect classes of both complex non-Kaehler and symplectic non-Kaehler manifolds.

  19. Trieste lectures on mirror symmetry

    Energy Technology Data Exchange (ETDEWEB)

    Hori, K [Department of Physics and Department of Mathematics, University of Toronto, Toronto, Ontario (Canada)

    2003-08-15

    These are pedagogical lectures on mirror symmetry given at the Spring School in ICTP, Trieste, March 2002. The focus is placed on worldsheet descriptions of the physics related to mirror symmetry. We start with the introduction to general aspects of (2,2) supersymmetric field theories in 1 + 1 dimensions. We next move on to the study and applications of linear sigma model. Finally, we provide a proof of mirror symmetry in a class of models. (author)

  20. Mirror Fusion Test Facility (MFTF)

    International Nuclear Information System (INIS)

    Thomassen, K.I.

    1978-01-01

    A large, new Mirror Fusion Test Facility is under construction at LLL. Begun in FY78 it will be completed at the end of FY78 at a cost of $94.2M. This facility gives the mirror program the flexibility to explore mirror confinement principles at a signficant scale and advances the technology of large reactor-like devices. The role of MFTF in the LLL program is described here

  1. Deformation microstructures

    DEFF Research Database (Denmark)

    Hansen, N.; Huang, X.; Hughes, D.A.

    2004-01-01

    Microstructural characterization and modeling has shown that a variety of metals deformed by different thermomechanical processes follows a general path of grain subdivision, by dislocation boundaries and high angle boundaries. This subdivision has been observed to very small structural scales...... of the order of 10 nm, produced by deformation under large sliding loads. Limits to the evolution of microstructural parameters during monotonic loading have been investigated based on a characterization by transmission electron microscopy. Such limits have been observed at an equivalent strain of about 10...

  2. Gasdynamic Mirror Fusion Propulsion Experiment

    Science.gov (United States)

    Emrich, Bill; Rodgers, Stephen L. (Technical Monitor)

    2000-01-01

    A gasdynamic mirror (GDM) fusion propulsion experiment is currently being constructed at the NASA Marshall Space Flight Center (MSFC) to test the feasibility of this particular type of fusion device. Because of the open magnetic field line configuration of mirror fusion devices, they are particularly well suited for propulsion system applications since they allow for the easy ejection of thrust producing plasma. Currently, the MSFC GDM is constructed in three segments. The vacuum chamber mirror segment, the plasma injector mirror segment, and the main plasma chamber segment. Enough magnets are currently available to construct up to three main plasma chamber segments. The mirror segments are also segmented such that they can be expanded to accommodate new end plugging strategies with out requiring the disassembly of the entire mirror segment. The plasma for the experiment is generated in a microwave cavity located between the main magnets and the mirror magnets. Ion heating is accomplished through ambipolar diffusion. The objective of the experiment is to investigate the stability characteristics of the gasdynamic mirror and to map a region of parameter space within which the plasma can be confined in a stable steady state configuration. The mirror ratio, plasma density, and plasma "b" will be varied over a range of values and measurements subsequently taken to determine the degree of plasma stability.

  3. PolyMEMS Actuator: A Polymer-Based Microelectromechanical (MEMS) Actuator with Macroscopic Action

    Science.gov (United States)

    2002-09-01

    DIRECTOR: MICHAEL L. TALBERT, Maj., USAF Technical Advisor , Information Technology Division Information Directorate...technologies meet even two of the four requirements, whereas PolyMEMS meets all four. Robo -Lobster Courtesy of Dr. Joseph Ayers, Northeastern

  4. Mirror profile optimization for nano-focusing KB mirror

    International Nuclear Information System (INIS)

    Zhang Lin; Baker, Robert; Barrett, Ray; Cloetens, Peter; Dabin, Yves

    2010-01-01

    A KB focusing mirror width profile has been optimized to achieve nano-focusing for the nano-imaging end-station ID22NI at the ESRF. The complete mirror and flexure bender assembly has been modeled in 3D with finite element analysis using ANSYS. Bender stiffness, anticlastic effects and geometrical non-linear effects have been considered. Various points have been studied: anisotropy and crystal orientation, stress in the mirror and bender, actuator resolution and the mirror-bender adhesive bonding... Extremely high performance of the mirror is expected with residual slope error smaller than 0.6 μrad, peak-to-valley, compared to the bent slope of 3000 μrad.

  5. Characterization of piezoelectric polymer composites for MEMS ...

    Indian Academy of Sciences (India)

    are obtained so that higher energy densities can be achieved along with ... The quality and reliability of MEMS ... beam are coupled and the bottom face is grounded. The top .... The electrical and mechanical responses of the material near the ...

  6. Fractal Structures For Mems Variable Capacitors

    KAUST Repository

    Elshurafa, Amro M.

    2014-08-28

    In accordance with the present disclosure, one embodiment of a fractal variable capacitor comprises a capacitor body in a microelectromechanical system (MEMS) structure, wherein the capacitor body has an upper first metal plate with a fractal shape separated by a vertical distance from a lower first metal plate with a complementary fractal shape; and a substrate above which the capacitor body is suspended.

  7. Novel RF-MEMS capacitive switching structures

    NARCIS (Netherlands)

    Rottenberg, X.; Jansen, Henricus V.; Fiorini, P.; De Raedt, W.; Tilmans, H.A.C.

    2002-01-01

    This paper reports on novel RF-MEMS capacitive switching devices implementing an electrically floating metal layer covering the dielectric to ensure intimate contact with the bridge in the down state. This results in an optimal switch down capacitance and allows optimisation of the down/up

  8. Characterization of dielectric charging in RF MEMS

    NARCIS (Netherlands)

    Herfst, R.W.; Huizing, H.G.A.; Steeneken, P.G.; Schmitz, Jurriaan

    2005-01-01

    Capacitive RF MEMS switches show great promise for use in wireless communication devices such as mobile phones, but the successful application of these switches is hindered by the reliability of the devices: charge injection in the dielectric layer (SiN) can cause irreversible stiction of the moving

  9. Calibration of High Frequency MEMS Microphones

    Science.gov (United States)

    Shams, Qamar A.; Humphreys, William M.; Bartram, Scott M.; Zuckewar, Allan J.

    2007-01-01

    Understanding and controlling aircraft noise is one of the major research topics of the NASA Fundamental Aeronautics Program. One of the measurement technologies used to acquire noise data is the microphone directional array (DA). Traditional direction array hardware, consisting of commercially available condenser microphones and preamplifiers can be too expensive and their installation in hard-walled wind tunnel test sections too complicated. An emerging micro-machining technology coupled with the latest cutting edge technologies for smaller and faster systems have opened the way for development of MEMS microphones. The MEMS microphone devices are available in the market but suffer from certain important shortcomings. Based on early experiments with array prototypes, it has been found that both the bandwidth and the sound pressure level dynamic range of the microphones should be increased significantly to improve the performance and flexibility of the overall array. Thus, in collaboration with an outside MEMS design vendor, NASA Langley modified commercially available MEMS microphone as shown in Figure 1 to meet the new requirements. Coupled with the design of the enhanced MEMS microphones was the development of a new calibration method for simultaneously obtaining the sensitivity and phase response of the devices over their entire broadband frequency range. Over the years, several methods have been used for microphone calibration. Some of the common methods of microphone calibration are Coupler (Reciprocity, Substitution, and Simultaneous), Pistonphone, Electrostatic actuator, and Free-field calibration (Reciprocity, Substitution, and Simultaneous). Traditionally, electrostatic actuators (EA) have been used to characterize air-condenser microphones for wideband frequency ranges; however, MEMS microphones are not adaptable to the EA method due to their construction and very small diaphragm size. Hence a substitution-based, free-field method was developed to

  10. Post-CMOS selective electroplating technique for the improvement of CMOS-MEMS accelerometers

    International Nuclear Information System (INIS)

    Liu, Yu-Chia; Tsai, Ming-Han; Fang, Weileun; Tang, Tsung-Lin

    2011-01-01

    This study presents a simple approach to improve the performance of the CMOS-MEMS capacitive accelerometer by means of the post-CMOS metal electroplating process. The metal layer can be selectively electroplated on the MEMS structures at low temperature and the thickness of the metal layer can be easily adjusted by this process. Thus the performance of the capacitive accelerometer (i.e. sensitivity, noise floor and the minimum detectable signal) can be improved. In application, the proposed accelerometers have been implemented using (1) the standard CMOS 0.35 µm 2P4M process by CMOS foundry, (2) Ti/Au seed layers deposition/patterning by MEMS foundry and (3) in-house post-CMOS electroplating and releasing processes. Measurements indicate that the sensitivity is improved 2.85-fold, noise is decreased near 1.7-fold and the minimum detectable signal is improved from 1 to 0.2 G after nickel electroplating. Moreover, unwanted structure deformation due to the temperature variation is significantly suppressed by electroplated nickel.

  11. Characterization of a bonding-in-liquid technique for liquid encapsulation into MEMS devices

    International Nuclear Information System (INIS)

    Okayama, Yoshiyuki; Nakahara, Keijiro; Arouette, Xavier; Ninomiya, Takeshi; Matsumoto, Yasuaki; Orimo, Yoshinori; Hotta, Atsushi; Omiya, Masaki; Miki, Norihisa

    2010-01-01

    We demonstrate and characterize a new bonding-in-liquid technique (BiLT) for the encapsulation of liquids in MEMS devices. Liquid encapsulation enables innovative MEMS devices with various functions exploiting the unique characteristics of liquids, such as high deformation and spherical shape due to surface tension. Interfusion of air bubbles, variation of the liquid quantity and leakage of the encapsulated liquid must be avoided, or device performance will deteriorate. In BiLT, two structural layers are passively aligned and brought into contact in a solution, and the encapsulation cavities are filled uniformly with liquid, without air bubbles. A UV-curable resin is used as an adhesive that does not require heat or vacuum to bond the layers, but UV irradiation. DI water, glycerin and phosphate buffer saline were successfully encapsulated in silicon structural layers with PDMS membranes. We experimentally evaluated the bond strengths and alignment accuracy of BiLT in order to provide crucial information for the application of this process to the packaging and/or manufacturing of MEMS devices. Since conventional aligners are not applicable to BiLT, we experimentally evaluated the accuracy of an in-solution passive alignment process, which made use of matching concave and convex structures.

  12. Development of a Two-Dimensional Array of Individually Addressable Micro-Mirrors for NGST Application

    Science.gov (United States)

    Dutta, S. B.; Mott, D. B.; Allen, C. A.; Ewin, A. J.; Jhabvala, M. D.; Kotecki, C. A.; Kuhn, J. L.; MacKenty, J. W.

    2000-05-01

    NASA's missions of the 21st century will use small, low cost, efficient instruments for Earth and Space Science studies. Development of technologies that accommodate these requirements is essential for space applications. Micro Electro Mechanical Systems (MEMS) technology development for sensors and actuators plays a major role in this effort. We are developing a two dimensional array of individually addressable, cryogenic micro-mirrors, a MEMS based component, specifically for application in the Multi Object Spectrometer (MOS) in NGST. Two-dimensional, individually addressable and tiltable aluminum micro-mirror-arrays (MMA) have been developed and prototype arrays of different sizes have been fabricated in the Detector Development Laboratory of NASA, GSFC. Each micro-mirror of the array has 100micronx100micron pixel size and is capable of tilting +/- 10 degrees by electrostatic actuation. We have completed extensive analytical studies and performed laboratory tests to compare model predictions with actual performance of a 3x3 array. The mirrors have been tested to operate at cryogenic temperature. Recently we have completed the integration of a CMOS based address and driver circuit for the MMA with its mechanical structure. Our goal is to extend the development to a 1024x1024 array, primarily for NGST and also for other imaging and spectroscopy applications. For NGST MOS, MMAs will be used as a reflective slit-mask at a focal plane of the spectrometer providing a large field of view together with diffraction limited angular resolution for a grating spectrometer. Selected areas of the mirror-array will be tilted to select portions of the scene so that observation of up to 1000 simultaneous spectra of sparse targets will be possible. This provides a factor of 100 improvement in observing speed over conventional spectrometers. Details of the technology development along with its application to NGST will be discussed. This work is supported by the GSFC Director

  13. Virtual Mirror gaming in libraries

    NARCIS (Netherlands)

    Speelman, M.; Kröse, B.; Nijholt, A.; Poppe, R.

    2008-01-01

    This paper presents a study on a natural interface game in the context of a library. We developed a camera-based Virtual Mirror (VM) game, in which the player can see himself on the screen as if he looks at a mirror image. We present an overview of the different aspects of VM games and technologies

  14. TCV mirrors cleaned by plasma

    Directory of Open Access Journals (Sweden)

    L. Marot

    2017-08-01

    Full Text Available Metallic mirrors exposed in TCV tokamak were cleaned by plasma in laboratory. A gold (Au mirror was deposited with 185–285nm of amorphous carbon (aC:D film coming from the carbon tiles of TCV. Another molybdenum (Mo mirror had a thicker deposit due to a different location within the tokamak. The thickness measurements were carried out using ellipsometry and the reflectivity measurements performed by spectrophotometry revealed a decrease of the specular reflectivity in the entire range (250–2500nm for the Mo mirror and specifically in the visible spectrum for the Au. Comparison of the simulated reflectivity using a refractive index of 1.5 and a Cauchy model for the aC:D gives good confidence on the estimated film thickness. Plasma cleaning using radio frequency directly applied to a metallic plate where the mirrors were fixed demonstrated the ability to remove the carbon deposits. A mixture of 50% hydrogen and 50% helium was used with a −200V self-bias. Due to the low sputtering yield of He and the low chemical erosion of hydrogen leading to volatile molecules, 20h of cleaning were needed for Au mirror and more than 60h for Mo mirror. Recovery of the reflectivity was not complete for the Au mirror most likely due to damage of the surface during tokamak exposure (breakdown phenomena.

  15. MEMS Actuators for Improved Performance and Durability

    Science.gov (United States)

    Yearsley, James M.

    Micro-ElectroMechanical Systems (MEMS) devices take advantage of force-scaling at length scales smaller than a millimeter to sense and interact with directly with phenomena and targets at the microscale. MEMS sensors found in everyday devices like cell-phones and cars include accelerometers, gyros, pressure sensors, and magnetic sensors. MEMS actuators generally serve more application specific roles including micro- and nano-tweezers used for single cell manipulation, optical switching and alignment components, and micro combustion engines for high energy density power generation. MEMS rotary motors are actuators that translate an electric drive signal into rotational motion and can serve as rate calibration inputs for gyros, stages for optical components, mixing devices for micro-fluidics, etc. Existing rotary micromotors suffer from friction and wear issues that affect lifetime and performance. Attempts to alleviate friction effects include surface treatment, magnetic and electrostatic levitation, pressurized gas bearings, and micro-ball bearings. The present work demonstrates a droplet based liquid bearing supporting a rotary micromotor that improves the operating characteristics of MEMS rotary motors. The liquid bearing provides wear-free, low-friction, passive alignment between the rotor and stator. Droplets are positioned relative to the rotor and stator through patterned superhydrophobic and hydrophilic surface coatings. The liquid bearing consists of a central droplet that acts as the motor shaft, providing axial alignment between rotor and stator, and satellite droplets, analogous to ball-bearings, that provide tip and tilt stable operation. The liquid bearing friction performance is characterized through measurement of the rotational drag coefficient and minimum starting torque due to stiction and geometric effects. Bearing operational performance is further characterized by modeling and measuring stiffness, environmental survivability, and high

  16. Research on large-aperture primary mirror supporting way of vehicle-mounted laser communication system

    Science.gov (United States)

    Meng, Lixin; Meng, Lingchen; Zhang, Yiqun; Zhang, Lizhong; Liu, Ming; Li, Xiaoming

    2018-01-01

    In the satellite to earth laser communication link, large-aperture ground laser communication terminals usually are used in order to realize the requirement of high rate and long distance communication and restrain the power fluctuation by atmospheric scintillation. With the increasing of the laser communication terminal caliber, the primary mirror weight should also be increased, and selfweight, thermal deformation and environment will affect the surface accuracy of the primary mirror surface. A high precision vehicular laser communication telescope unit with an effective aperture of 600mm was considered in this paper. The primary mirror is positioned with center hole, which back is supported by 9 floats and the side is supported by a mercury band. The secondary mirror adopts a spherical adjusting mechanism. Through simulation analysis, the system wave difference is better than λ/20 when the primary mirror is in different dip angle, which meets the requirements of laser communication.

  17. Mirroring patients – or not

    DEFF Research Database (Denmark)

    Davidsen, Annette Sofie; Fosgerau, Christina Fogtmann

    2015-01-01

    on studies of imitative behaviour within linguistics and psychology, we argue that interactional mirroring is an important aspect of displaying implicit mentalization. We aimed to explore if, and in that case how, mirroring is displayed by general practitioners (GPs) and psychiatrists in consultations...... with patients with depression. We wanted to see how implicit mentalizing unfolds in physician–patient interactions. Consultations were videorecorded and analysed within the framework of conversation analysis. GPs and psychiatrists differed substantially in their propensity to mirror body movements and verbal...... and acoustic features of speech. GPs mirrored their patients more than psychiatrists in all modalities and were more flexible in their interactional behaviour. Psychiatrists seemed more static, regardless of the emotionality displayed by patients. Implicitly mirroring and attuning to patients could signify...

  18. Introduction to tandem mirror physics

    International Nuclear Information System (INIS)

    Kesner, J.; Gerver, M.J.; Lane, B.G.; McVey, B.D.; Catto, P.J.; D'Ippolito, D.A.; Myra, J.R.

    1983-09-01

    This monograph, prepared jointly by the MIT Plasma Fusion Center Mirror Fusion group and SAI, Boulder, Colorado, presents a review of the development of mirror fusion theory from its conception some thirty years ago to the present. Pertinent historic experiments and their contribution are discussed to set the stage for a detailed analysis of current experiments and the problems which remain to be solved in bringing tandem mirror magnetic confinement fusion to fruition. In particular, Chapter III discusses in detail the equilibrium and stability questions which must be dealt with before tandem mirror reactors become feasible, while Chapters IV and V discuss some of the current machines and those under construction which will help to resolve critical issues in both physics and engineering whose solutions are necessary to the commercialization of tandem mirror fusion

  19. Potential measurements in tandem mirrors

    International Nuclear Information System (INIS)

    Glowienka, J.C.

    1985-11-01

    The US mirror program has begun conducting experiments with a thermal barrier tandem mirror configuration. This configuration requires a specific axial potential profile and implies measurements of potential for documentation and optimization of the configuration. This report briefly outlines the motivation for the thermal barrier tandem mirror and then outlines the techniques used to document the potential profile in conventional and thermal barrier tandem mirrors. Examples of typical data sets from the world's major tandem mirror experiments, TMX and TMX-U at Lawrence Livermore National Laboratory (LLNL) and Gamma 10 at Tsukuba University in Japan, and the current interpretation of the data are discussed together with plans for the future improvement of measurements of plasma potential

  20. LLL mirror fusion program: summary

    International Nuclear Information System (INIS)

    Fowler, T.K.

    1977-01-01

    During 1976, new Mirror Program plans have been laid out to take into account the significant advances during the last 18 months. The program is now focused on two new mirror concepts, field reversal and the tandem mirror, that can obtain high Q, defined as the ratio of fusion power output to the neutral-beam power injected to sustain the reaction. Theoretically, both concepts can attain Q = 5 or more, as compared to Q = 1 in previous mirror designs. Experimental planning for the next 5 years is complete in broad outline, and we are turning attention to what additional steps are necessary to reach our long-range goal of an experimental mirror reactor operating by 1990. Highlights of the events that have led to the above circumstance are listed, and experimental program plans are outlined

  1. Genetics Home Reference: congenital mirror movement disorder

    Science.gov (United States)

    ... Health Conditions Congenital mirror movement disorder Congenital mirror movement disorder Printable PDF Open All Close All Enable ... view the expand/collapse boxes. Description Congenital mirror movement disorder is a condition in which intentional movements ...

  2. Sandia Agile MEMS Prototyping, Layout Tools, Education and Services Program

    Energy Technology Data Exchange (ETDEWEB)

    Schriner, H.; Davies, B.; Sniegowski, J.; Rodgers, M.S.; Allen, J.; Shepard, C.

    1998-05-01

    Research and development in the design and manufacture of Microelectromechanical Systems (MEMS) is growing at an enormous rate. Advances in MEMS design tools and fabrication processes at Sandia National Laboratories` Microelectronics Development Laboratory (MDL) have broadened the scope of MEMS applications that can be designed and manufactured for both military and commercial use. As improvements in micromachining fabrication technologies continue to be made, MEMS designs can become more complex, thus opening the door to an even broader set of MEMS applications. In an effort to further research and development in MEMS design, fabrication, and application, Sandia National Laboratories has launched the Sandia Agile MEMS Prototyping, Layout Tools, Education and Services Program or SAMPLES program. The SAMPLES program offers potential partners interested in MEMS the opportunity to prototype an idea and produce hardware that can be used to sell a concept. The SAMPLES program provides education and training on Sandia`s design tools, analysis tools and fabrication process. New designers can participate in the SAMPLES program and design MEMS devices using Sandia`s design and analysis tools. As part of the SAMPLES program, participants` designs are fabricated using Sandia`s 4 level polycrystalline silicon surface micromachine technology fabrication process known as SUMMiT (Sandia Ultra-planar, Multi-level MEMS Technology). Furthermore, SAMPLES participants can also opt to obtain state of the art, post-fabrication services provided at Sandia such as release, packaging, reliability characterization, and failure analysis. This paper discusses the components of the SAMPLES program.

  3. Design for an aberration corrected scanning electron microscope using miniature electron mirrors.

    Science.gov (United States)

    Dohi, Hideto; Kruit, Pieter

    2018-06-01

    Resolution of scanning electron microscopes (SEMs) is determined by aberrations of the objective lens. It is well known that both spherical and chromatic aberrations can be compensated by placing a 90-degree bending magnet and an electron mirror in the beam path before the objective lens. Nevertheless, this approach has not led to wide use of these aberration correctors, partly because aberrations of the bending magnet can be a serious problem. A mirror corrector with two mirrors placed perpendicularly to the optic axis of an SEM and facing each other is proposed. As a result, only small-angle magnetic deflection is necessary to guide the electron beam around the top mirror to the bottom mirror and around the bottom mirror to the objective lens. The deflection angle, in the order of 50 mrad, is sufficiently small to avoid deflection aberrations. In addition, lateral dispersion at the sample plane can be avoided by making the deflection fields symmetric. Such a corrector system is only possible if the incoming beam can pass the top mirror at a distance in the order of millimeters, without being disturbed by the electric fields of electrodes of the mirror. It is proposed that condition can be satisfied with micro-scale electron optical elements fabricated by using MEMS technology. In the proposed corrector system, the micro-mirrors have to provide the exact negative spherical and chromatic aberrations for correcting the aberration of the objective lens. This exact tuning is accomplished by variable magnification between the micro-mirrors and the objective lens using an additional transfer lens. Extensive optical calculations are reported. Aberrations of the micro-mirrors were analyzed by numerical calculation. Dispersion and aberrations of the deflectors were calculated by using an analytical field model. Combination aberrations caused by the off-axis position of dispersive rays in the mirrors and objective lens were also analyzed. It is concluded that the proposed

  4. Uncertainty quantification in capacitive RF MEMS switches

    Science.gov (United States)

    Pax, Benjamin J.

    Development of radio frequency micro electrical-mechanical systems (RF MEMS) has led to novel approaches to implement electrical circuitry. The introduction of capacitive MEMS switches, in particular, has shown promise in low-loss, low-power devices. However, the promise of MEMS switches has not yet been completely realized. RF-MEMS switches are known to fail after only a few months of operation, and nominally similar designs show wide variability in lifetime. Modeling switch operation using nominal or as-designed parameters cannot predict the statistical spread in the number of cycles to failure, and probabilistic methods are necessary. A Bayesian framework for calibration, validation and prediction offers an integrated approach to quantifying the uncertainty in predictions of MEMS switch performance. The objective of this thesis is to use the Bayesian framework to predict the creep-related deflection of the PRISM RF-MEMS switch over several thousand hours of operation. The PRISM switch used in this thesis is the focus of research at Purdue's PRISM center, and is a capacitive contacting RF-MEMS switch. It employs a fixed-fixed nickel membrane which is electrostatically actuated by applying voltage between the membrane and a pull-down electrode. Creep plays a central role in the reliability of this switch. The focus of this thesis is on the creep model, which is calibrated against experimental data measured for a frog-leg varactor fabricated and characterized at Purdue University. Creep plasticity is modeled using plate element theory with electrostatic forces being generated using either parallel plate approximations where appropriate, or solving for the full 3D potential field. For the latter, structure-electrostatics interaction is determined through immersed boundary method. A probabilistic framework using generalized polynomial chaos (gPC) is used to create surrogate models to mitigate the costly full physics simulations, and Bayesian calibration and forward

  5. Improvements in analysis techniques for segmented mirror arrays

    Science.gov (United States)

    Michels, Gregory J.; Genberg, Victor L.; Bisson, Gary R.

    2016-08-01

    The employment of actively controlled segmented mirror architectures has become increasingly common in the development of current astronomical telescopes. Optomechanical analysis of such hardware presents unique issues compared to that of monolithic mirror designs. The work presented here is a review of current capabilities and improvements in the methodology of the analysis of mechanically induced surface deformation of such systems. The recent improvements include capability to differentiate surface deformation at the array and segment level. This differentiation allowing surface deformation analysis at each individual segment level offers useful insight into the mechanical behavior of the segments that is unavailable by analysis solely at the parent array level. In addition, capability to characterize the full displacement vector deformation of collections of points allows analysis of mechanical disturbance predictions of assembly interfaces relative to other assembly interfaces. This capability, called racking analysis, allows engineers to develop designs for segment-to-segment phasing performance in assembly integration, 0g release, and thermal stability of operation. The performance predicted by racking has the advantage of being comparable to the measurements used in assembly of hardware. Approaches to all of the above issues are presented and demonstrated by example with SigFit, a commercially available tool integrating mechanical analysis with optical analysis.

  6. Mirror symmetry, toric branes and topological string amplitudes as polynomials

    Energy Technology Data Exchange (ETDEWEB)

    Alim, Murad

    2009-07-13

    The central theme of this thesis is the extension and application of mirror symmetry of topological string theory. The contribution of this work on the mathematical side is given by interpreting the calculated partition functions as generating functions for mathematical invariants which are extracted in various examples. Furthermore the extension of the variation of the vacuum bundle to include D-branes on compact geometries is studied. Based on previous work for non-compact geometries a system of differential equations is derived which allows to extend the mirror map to the deformation spaces of the D-Branes. Furthermore, these equations allow the computation of the full quantum corrected superpotentials which are induced by the D-branes. Based on the holomorphic anomaly equation, which describes the background dependence of topological string theory relating recursively loop amplitudes, this work generalizes a polynomial construction of the loop amplitudes, which was found for manifolds with a one dimensional space of deformations, to arbitrary target manifolds with arbitrary dimension of the deformation space. The polynomial generators are determined and it is proven that the higher loop amplitudes are polynomials of a certain degree in the generators. Furthermore, the polynomial construction is generalized to solve the extension of the holomorphic anomaly equation to D-branes without deformation space. This method is applied to calculate higher loop amplitudes in numerous examples and the mathematical invariants are extracted. (orig.)

  7. Mirror symmetry, toric branes and topological string amplitudes as polynomials

    International Nuclear Information System (INIS)

    Alim, Murad

    2009-01-01

    The central theme of this thesis is the extension and application of mirror symmetry of topological string theory. The contribution of this work on the mathematical side is given by interpreting the calculated partition functions as generating functions for mathematical invariants which are extracted in various examples. Furthermore the extension of the variation of the vacuum bundle to include D-branes on compact geometries is studied. Based on previous work for non-compact geometries a system of differential equations is derived which allows to extend the mirror map to the deformation spaces of the D-Branes. Furthermore, these equations allow the computation of the full quantum corrected superpotentials which are induced by the D-branes. Based on the holomorphic anomaly equation, which describes the background dependence of topological string theory relating recursively loop amplitudes, this work generalizes a polynomial construction of the loop amplitudes, which was found for manifolds with a one dimensional space of deformations, to arbitrary target manifolds with arbitrary dimension of the deformation space. The polynomial generators are determined and it is proven that the higher loop amplitudes are polynomials of a certain degree in the generators. Furthermore, the polynomial construction is generalized to solve the extension of the holomorphic anomaly equation to D-branes without deformation space. This method is applied to calculate higher loop amplitudes in numerous examples and the mathematical invariants are extracted. (orig.)

  8. MEMS for Tunable Photonic Metamaterial Applications

    Science.gov (United States)

    Stark, Thomas

    Photonic metamaterials are materials whose optical properties are derived from artificially-structured sub-wavelength unit cells, rather than from the bulk properties of the constituent materials. Examples of metamaterials include plasmonic materials, negative index materials, and electromagnetic cloaks. While advances in simulation tools and nanofabrication methods have allowed this field to grow over the past several decades, many challenges still exist. This thesis addresses two of these challenges: fabrication of photonic metamaterials with tunable responses and high-throughput nanofabrication methods for these materials. The design, fabrication, and optical characterization of a microelectromechanical systems (MEMS) tunable plasmonic spectrometer are presented. An array of holes in a gold film, with plasmon resonance in the mid-infrared, is suspended above a gold reflector, forming a Fabry-Perot interferometer of tunable length. The spectra exhibit the convolution of extraordinary optical transmission through the holes and Fabry-Perot resonances. Using MEMS, the interferometer length is modulated from 1.7 mum to 21.67 mum , thereby tuning the free spectral range from about 2900 wavenumbers to 230.7 wavenumbers and shifting the reflection minima and maxima across the infrared. Due to its broad spectral tunability in the fingerprint region of the mid-infrared, this device shows promise as a tunable biological sensing device. To address the issue of high-throughput, high-resolution fabrication of optical metamaterials, atomic calligraphy, a MEMS-based dynamic stencil lithography technique for resist-free fabrication of photonic metamaterials on unconventional substrates, has been developed. The MEMS consists of a moveable stencil, which can be actuated with nanometer precision using electrostatic comb drive actuators. A fabrication method and flip chip method have been developed, enabling evaporation of metals through the device handle for fabrication on an

  9. Advanced Mirror & Modelling Technology Development

    Science.gov (United States)

    Effinger, Michael; Stahl, H. Philip; Abplanalp, Laura; Maffett, Steven; Egerman, Robert; Eng, Ron; Arnold, William; Mosier, Gary; Blaurock, Carl

    2014-01-01

    The 2020 Decadal technology survey is starting in 2018. Technology on the shelf at that time will help guide selection to future low risk and low cost missions. The Advanced Mirror Technology Development (AMTD) team has identified development priorities based on science goals and engineering requirements for Ultraviolet Optical near-Infrared (UVOIR) missions in order to contribute to the selection process. One key development identified was lightweight mirror fabrication and testing. A monolithic, stacked, deep core mirror was fused and replicated twice to achieve the desired radius of curvature. It was subsequently successfully polished and tested. A recently awarded second phase to the AMTD project will develop larger mirrors to demonstrate the lateral scaling of the deep core mirror technology. Another key development was rapid modeling for the mirror. One model focused on generating optical and structural model results in minutes instead of months. Many variables could be accounted for regarding the core, face plate and back structure details. A portion of a spacecraft model was also developed. The spacecraft model incorporated direct integration to transform optical path difference to Point Spread Function (PSF) and between PSF to modulation transfer function. The second phase to the project will take the results of the rapid mirror modeler and integrate them into the rapid spacecraft modeler.

  10. Survey of mirror machine reactors

    International Nuclear Information System (INIS)

    Condit, W.C.

    1978-01-01

    The Magnetic Mirror Fusion Program is one of the two main-line fusion efforts in the United States. Starting from the simple axisymmetric mirror concept in the 1950's, the program has successfully overcome gross flute-type instabilities (using minimum-B magnetic fields), and the most serious of the micro-instabilities which plagued it (the drift-cyclotron loss-cone mode). Dense plasmas approaching the temperature range of interest for fusion have been created (n/sub p/ = 10 14 /cc at 10 to 12 keV). At the same time, rather extensive conceptual design studies of possible mirror configurations have led to three principle designs of interest: the standard mirror fission-fusion hybrid, tandem mirror, and the field-reversed mirror. The lectures will discuss these three concepts in turn. There will be no discussion of diagnostics for the mirror machine in these lectures, but typical plasma parameters will be given for each type of machine, and the diagnostic requirements will be apparent. In a working fusion reactor, diagnostics will be required for operational control, and remarks will be made on this subject

  11. Tandem mirror and field-reversed mirror experiments

    Energy Technology Data Exchange (ETDEWEB)

    Coensgen, F.H.; Simonen, T.C.; Turner, W.C.

    1979-08-21

    This paper is largely devoted to tandem mirror and field-reversed mirror experiments at the Lawrence Livermore Laboratory (LLL), and briefly summarizes results of experiments in which field-reversal has been achieved. In the tandem experiment, high-energy, high-density plasmas (nearly identical to 2XIIB plasmas) are located at each end of a solenoid where plasma ions are electrostatically confined by the high positive poentials arising in the end plug plasma. End plug ions are magnetically confined, and electrons are electrostatically confined by the overall positive potential of the system. The field-reversed mirror reactor consists of several small field-reversed mirror plasmas linked together for economic reasons. In the LLL Beta II experiment, generation of a field-reversed plasma ring will be investigated using a high-energy plasma gun with a transverse radial magnetic field. This plasma will be further heated and sustained by injection of intense, high-energy neutral beams.

  12. Construction and Initial Validation of the Multiracial Experiences Measure (MEM)

    Science.gov (United States)

    Yoo, Hyung Chol; Jackson, Kelly; Guevarra, Rudy P.; Miller, Matthew J.; Harrington, Blair

    2015-01-01

    This article describes the development and validation of the Multiracial Experiences Measure (MEM): a new measure that assesses uniquely racialized risks and resiliencies experienced by individuals of mixed racial heritage. Across two studies, there was evidence for the validation of the 25-item MEM with 5 subscales including Shifting Expressions, Perceived Racial Ambiguity, Creating Third Space, Multicultural Engagement, and Multiracial Discrimination. The 5-subscale structure of the MEM was supported by a combination of exploratory and confirmatory factor analyses. Evidence of criterion-related validity was partially supported with MEM subscales correlating with measures of racial diversity in one’s social network, color-blind racial attitude, psychological distress, and identity conflict. Evidence of discriminant validity was supported with MEM subscales not correlating with impression management. Implications for future research and suggestions for utilization of the MEM in clinical practice with multiracial adults are discussed. PMID:26460977

  13. Edificio Daily Mirror

    Directory of Open Access Journals (Sweden)

    Williams, Owen

    1963-07-01

    Full Text Available The building has 18 levels. The Press occupies the 4 basement floors. The ground floor is taken up with the entrance hall, and an indoor carriage way. A snack bar and the telephone operators are situated on the second floor. The production department and the medical services are located on the third storey, whilst the fourth is occupied by the offices and library. The fifth floor is the beginning of the higher section of the building. This floor and up to including the 11th floor are devoted to office space, except for the 10th storey, which contains the office apartments of the directors and the Council Chamber. Equipment related to various services of the building is housed on the 12th storey. Finally, this tall building constitutes a fine landmark in the London skyline. The Daily Mirror building is outstanding for the appropriate nature, the completeness and the quality of its installations, which thus provide the most widely read paper in the world with outstandingly efficient offices.Este edificio consta de 18 plantas. El cuerpo de Prensa se aloja en los cuatro sótanos; los vestíbulos de entrada y una calzada interior para vehículos se hallan en la planta baja; la primera alberga un snack-bar y centralita telefónica; la segunda, el departamento de producción y centro de asistencia médica, y la tercera, las oficinas y biblioteca principales. La cuarta planta señala el comienzo del bloque alto; esta planta, junto con las quinta, sexta, séptima, octava y décima, están dedicadas a oficinas. La novena contiene las oficinas-apartamentos de los directores y salas de Consejo, y la undécima, la maquinaria para las diversas instalaciones del edificio. La elevada torre constituye un grandioso hito de referencia en esta zona de Londres. El «Daily Mirror» se distingue por el acierto, número y perfección de sus instalaciones, que proporcionan, al periódico de mayor actualidad mundial, las más adecuadas y amplias oficinas modernas.

  14. Kodak AMSD Mirror Development Program

    Science.gov (United States)

    Matthews, Gary; Dahl, Roger; Barrett, David; Bottom, John; Russell, Kevin (Technical Monitor)

    2002-01-01

    The Advanced Mirror System Demonstration Program is developing minor technology for the next generation optical systems. Many of these systems will require extremely lightweight and stable optics due to the overall size of the primary mirror. These segmented, deployable systems require new technology that AMSD is developing. The on-going AMSD program is a critical enabler for Next Generation Space Telescope (NGST) which will start in 2002. The status of Kodak's AMSD mirror and future plans will be discussed with respect to the NGST program.

  15. Optical fibre angle sensor used in MEMS

    International Nuclear Information System (INIS)

    Golebiowski, J; Milcarz, Sz; Rybak, M

    2014-01-01

    There is a need for displacement and angle measurements in many movable MEMS structures. The use of fibre optical sensors helps to measure micrometre displacements and small rotation angles. Advantages of this type of transducers are their simple design, high precision of processing, low costs and ability of a non-contact measurement. The study shows an analysis of a fibre-optic intensity sensor used for MEMS movable structure rotation angle measurement. An intensity of the light in the photodetector is basically dependent on a distance between a reflecting surface and a head surface of the fibre transmitting arm, and the deflection angle. Experimental tests were made for PMMA 980/1000 plastic fibres, Θ NA =33°. The study shows both analytical and practical results. It proves that calculated and experimental characteristics for the analysed transducers are similar.

  16. Giant piezoelectricity on Si for hyperactive MEMS.

    Science.gov (United States)

    Baek, S H; Park, J; Kim, D M; Aksyuk, V A; Das, R R; Bu, S D; Felker, D A; Lettieri, J; Vaithyanathan, V; Bharadwaja, S S N; Bassiri-Gharb, N; Chen, Y B; Sun, H P; Folkman, C M; Jang, H W; Kreft, D J; Streiffer, S K; Ramesh, R; Pan, X Q; Trolier-McKinstry, S; Schlom, D G; Rzchowski, M S; Blick, R H; Eom, C B

    2011-11-18

    Microelectromechanical systems (MEMS) incorporating active piezoelectric layers offer integrated actuation, sensing, and transduction. The broad implementation of such active MEMS has long been constrained by the inability to integrate materials with giant piezoelectric response, such as Pb(Mg(1/3)Nb(2/3))O(3)-PbTiO(3) (PMN-PT). We synthesized high-quality PMN-PT epitaxial thin films on vicinal (001) Si wafers with the use of an epitaxial (001) SrTiO(3) template layer with superior piezoelectric coefficients (e(31,f) = -27 ± 3 coulombs per square meter) and figures of merit for piezoelectric energy-harvesting systems. We have incorporated these heterostructures into microcantilevers that are actuated with extremely low drive voltage due to thin-film piezoelectric properties that rival bulk PMN-PT single crystals. These epitaxial heterostructures exhibit very large electromechanical coupling for ultrasound medical imaging, microfluidic control, mechanical sensing, and energy harvesting.

  17. Active mems microbeam device for gas detection

    KAUST Repository

    Bouchaala, Adam M.

    2017-10-05

    Sensors and active switches for applications in gas detection and other fields are described. The devices are based on the softening and hardening nonlinear response behaviors of microelectromechanical systems (MEMS) clamped-clamped microbeams. In that context, embodiments of gas-triggered MEMS microbeam sensors and switches are described. The microbeam devices can be coated with a Metal-Organic Framework to achieve high sensitivity. For gas sensing, an amplitude-based tracking algorithm can be used to quantify an amount of gas captured by the devices according to frequency shift. Noise analysis is also conducted according to the embodiments, which shows that the microbeam devices have high stability against thermal noise. The microbeam devices are also suitable for the generation of binary sensing information for alarming, for example.

  18. Enabling MEMS technologies for communications systems

    Science.gov (United States)

    Lubecke, Victor M.; Barber, Bradley P.; Arney, Susanne

    2001-11-01

    Modern communications demands have been steadily growing not only in size, but sophistication. Phone calls over copper wires have evolved into high definition video conferencing over optical fibers, and wireless internet browsing. The technology used to meet these demands is under constant pressure to provide increased capacity, speed, and efficiency, all with reduced size and cost. Various MEMS technologies have shown great promise for meeting these challenges by extending the performance of conventional circuitry and introducing radical new systems approaches. A variety of strategic MEMS structures including various cost-effective free-space optics and high-Q RF components are described, along with related practical implementation issues. These components are rapidly becoming essential for enabling the development of progressive new communications systems technologies including all-optical networks, and low cost multi-system wireless terminals and basestations.

  19. MEMS Gyroscopes Based on Acoustic Sagnac Effect

    Directory of Open Access Journals (Sweden)

    Yuanyuan Yu

    2016-12-01

    Full Text Available This paper reports on the design, fabrication and preliminary test results of a novel microelectromechanical systems (MEMS device—the acoustic gyroscope. The unique operating mechanism is based on the “acoustic version” of the Sagnac effect in fiber-optic gyros. The device measures the phase difference between two sound waves traveling in opposite directions, and correlates the signal to the angular velocity of the hosting frame. As sound travels significantly slower than light and develops a larger phase change within the same path length, the acoustic gyro can potentially outperform fiber-optic gyros in sensitivity and form factor. It also promises superior stability compared to vibratory MEMS gyros as the design contains no moving parts and is largely insensitive to mechanical stress or temperature. We have carried out systematic simulations and experiments, and developed a series of processes and design rules to implement the device.

  20. SOI silicon on glass for optical MEMS

    DEFF Research Database (Denmark)

    Larsen, Kristian Pontoppidan; Ravnkilde, Jan Tue; Hansen, Ole

    2003-01-01

    and a final sealing at the interconnects can be performed using a suitable polymer. Packaged MEMS on glass are advantageous within Optical MEMS and for sensitive capacitive devices. We report on experiences with bonding SOI to Pyrex. Uniform DRIE shallow and deep etching was achieved by a combination......A newly developed fabrication method for fabrication of single crystalline Si (SCS) components on glass, utilizing Deep Reactive Ion Etching (DRIE) of a Silicon On Insulator (SOI) wafer is presented. The devices are packaged at wafer level in a glass-silicon-glass (GSG) stack by anodic bonding...... of an optimized device layout and an optimized process recipe. The behavior of the buried oxide membrane when used as an etch stop for the through-hole etch is described. No harmful buckling or fracture of the membrane is observed for an oxide thickness below 1 μm, but larger and more fragile released structures...

  1. Quantitative Accelerated Life Testing of MEMS Accelerometers.

    Science.gov (United States)

    Bâzu, Marius; Gălăţeanu, Lucian; Ilian, Virgil Emil; Loicq, Jerome; Habraken, Serge; Collette, Jean-Paul

    2007-11-20

    Quantitative Accelerated Life Testing (QALT) is a solution for assessing thereliability of Micro Electro Mechanical Systems (MEMS). A procedure for QALT is shownin this paper and an attempt to assess the reliability level for a batch of MEMSaccelerometers is reported. The testing plan is application-driven and contains combinedtests: thermal (high temperature) and mechanical stress. Two variants of mechanical stressare used: vibration (at a fixed frequency) and tilting. Original equipment for testing at tiltingand high temperature is used. Tilting is appropriate as application-driven stress, because thetilt movement is a natural environment for devices used for automotive and aerospaceapplications. Also, tilting is used by MEMS accelerometers for anti-theft systems. The testresults demonstrated the excellent reliability of the studied devices, the failure rate in the"worst case" being smaller than 10 -7 h -1 .

  2. Melancolia, memória e subjetividade

    OpenAIRE

    Giele Rocha Dorneles

    2015-01-01

    A proposta desta tese é estabelecer, através de uma perspectiva comparatista, relações entre três temas articuladores: a melancolia, a memória e a subjetividade, de modo a constituir entrelaçamentos possíveis, além de buscar indicar o modo como essas três temáticas são apresentadas e representadas em diferentes formas de expressão das artes, partindo de obras literárias - como “A maior flor do mundo” e “As pequenas memórias”, entre outras de José Saramago, e de autores como Charles Baudelaire...

  3. MEMS-based sensors for post-earthquake damage assessment

    Energy Technology Data Exchange (ETDEWEB)

    Pozzi, M; Zonta, D; Trapani, D [DIMS, University of Trento, Via Mesiano 77, 38123, Trento (Italy); Athanasopoulos, N; Garetsos, A; Stratakos, Y E [Advanced Microwave Systems Ltd, 2, 25th Martiou Street, 17778 Athens (Greece); Amditis, A J; Bimpas, M [ICCS, National Technical University of Athens, 9 Iroon Polytechniou Street, 15773 Zografou (Greece); Ulieru, D, E-mail: daniele.zonta@unitn.it [SITEX 45 SRL, 114 Ghica Tei Blvd, 72235 Bucharest (Romania)

    2011-07-19

    The evaluation of seismic damage is today almost exclusively based on visual inspection, as building owners are generally reluctant to install permanent sensing systems, due to their high installation, management and maintenance costs. To overcome this limitation, the EU-funded MEMSCON project aims to produce small size sensing nodes for measurement of strain and acceleration, integrating Micro-Electro-Mechanical Systems (MEMS) based sensors and Radio Frequency Identification (RFID) tags in a single package that will be attached to reinforced concrete buildings and will transmit data using a wireless interface. During the first phase of the project completed so far, sensor prototypes were produced by assembling preexisting components. This paper outlines the device operating principles, production scheme and operation at both unit and network levels. It also reports on validation campaigns conducted in the laboratory to assess system performance. Accelerometer sensors were tested on a reduced scale metal frame mounted on a shaking table, while strain sensors were embedded in both reduced and full-scale reinforced concrete specimens undergoing increasing deformation cycles up to extensive damage and collapse. The performance of the sensors developed for the project and their applicability to long-term seismic monitoring are discussed.

  4. Creep-resistant aluminum alloys for use in MEMS

    Science.gov (United States)

    Modlinski, R.; Ratchev, P.; Witvrouw, A.; Puers, R.; DeWolf, I.

    2005-07-01

    Creep is expected to be a reliability issue in MEMS where high temperatures and stresses are present in the moving part. In this paper, we describe a method of measuring the creep parameters, ΔF and τ, in metal thin films. Substrate curvature measurements were used to study different Al alloys—Al98.3Cu1.7, Al99.7V0.2Pd0.1, Al93.5Cu4.4Mg1.5Mn0.6 and Al99.6Cu0.4 films—during isothermal tensile stress relaxation. We show that there is a direct relation between the measured creep parameters and the coherency, size and spacing of precipitates observed by TEM and SEM in the alloys. Furthermore, we confirm that the plastic deformation is controlled by the motion of dislocations inside grains in the Al alloy films. A strengthening process called precipitation hardening was used to create stronger precipitates within the grains in Al99.6Cu0.4 to hinder the movement of dislocations more effectively and thus to make the alloy more creep resistant.

  5. Tinbergen on mirror neurons

    Science.gov (United States)

    Heyes, Cecilia

    2014-01-01

    Fifty years ago, Niko Tinbergen defined the scope of behavioural biology with his four problems: causation, ontogeny, survival value and evolution. About 20 years ago, there was another highly significant development in behavioural biology—the discovery of mirror neurons (MNs). Here, I use Tinbergen's original four problems (rather than the list that appears in textbooks) to highlight the differences between two prominent accounts of MNs, the genetic and associative accounts; to suggest that the latter provides the defeasible ‘best explanation’ for current data on the causation and ontogeny of MNs; and to argue that functional analysis, of the kind that Tinbergen identified somewhat misleadingly with studies of ‘survival value’, should be a high priority for future research. In this kind of functional analysis, system-level theories would assign MNs a small, but potentially important, role in the achievement of action understanding—or another social cognitive function—by a production line of interacting component processes. These theories would be tested by experimental intervention in human and non-human animal samples with carefully documented and controlled developmental histories. PMID:24778376

  6. Photocatalytic, antifogging mirror

    International Nuclear Information System (INIS)

    Takagi, K.; Makimoto, T.; Hiraiwa, H.; Negishi, T.

    2001-01-01

    This article is about the coating of thin titanium dioxide film by sputter deposition. When irradiated with solar light, thin titanium dioxide film exhibits high oxidizing power and provides sterilizing, cleaning, decomposing, and hydrophylic effects. This technique has already been used for coating building walls by the sol-gel method and by others and has been partly commercialized to make automotive sideview mirrors. There have been no practical applications of the sputter deposition method so far, but establishment of the coating method is expected because of its excellent properties of film production techniques such as film thickness uniformity, film quality durability, and freedom from environmental pollution. In this article we discuss the establishment of the method of evaluating the quality of thin titanium dioxide film, establishment of sputter-deposition conditions, and the results of observation by x-ray diffraction and atomic force microscopy of the thin film. It was found that titanium dioxide films, 200 nm or more in thickness, have the above mentioned performance and that sputter deposition allows the film to form without heating

  7. Stabilized thermally compensated mirror

    International Nuclear Information System (INIS)

    Dunn, C. III; Tobin, R.D.; Bergstreser, N.E.; Heinz, T.A.

    1975-01-01

    A thermally compensated mirror is described that is formed by a laminated structure. The structure is comprised of a front plate having a reflective front surface and having a plurality of grooves formed in the rear surface for conducting coolant fluid in heat exchanging relation with said reflective surface, a rear plate having coolant inlet and coolant outlet openings extending therethrough, a minimum temperature plate interposed between said front and rear plates and formed with a plurality of coolant distribution passageways coupled to receive coolant fluid from said coolant inlet and oriented to distribute said coolant fluid in a manner to establish a minimum temperature plane parallel to said reflective surface, a temperature stabilization plate interposed between said front plate and said minimum temperature plate and formed with a plurality of coolant distribution channels coupled to receive said coolant fluid after said coolant fluid has passed in heat exchanging relation with said reflective surface and oriented to distribute said coolant fluid in a manner to establish a uniform temperature plane parallel to said reflective surface, and means for circulating said coolant fluid through said structure in a predetermined path. (U.S.)

  8. Tinbergen on mirror neurons.

    Science.gov (United States)

    Heyes, Cecilia

    2014-01-01

    Fifty years ago, Niko Tinbergen defined the scope of behavioural biology with his four problems: causation, ontogeny, survival value and evolution. About 20 years ago, there was another highly significant development in behavioural biology-the discovery of mirror neurons (MNs). Here, I use Tinbergen's original four problems (rather than the list that appears in textbooks) to highlight the differences between two prominent accounts of MNs, the genetic and associative accounts; to suggest that the latter provides the defeasible 'best explanation' for current data on the causation and ontogeny of MNs; and to argue that functional analysis, of the kind that Tinbergen identified somewhat misleadingly with studies of 'survival value', should be a high priority for future research. In this kind of functional analysis, system-level theories would assign MNs a small, but potentially important, role in the achievement of action understanding-or another social cognitive function-by a production line of interacting component processes. These theories would be tested by experimental intervention in human and non-human animal samples with carefully documented and controlled developmental histories.

  9. On the Stiction of MEMS Materials

    DEFF Research Database (Denmark)

    Zhuang, Yanxin; Menon, Aric Kumaran

    2005-01-01

    energies and stiction of commonly used MEMS materials by contact angle measurements and atomic force microscopy (AFM). Dispersive and polar components of surface energies are calculated by Owens-Wendt-Rabel-Kaelble method. Silicon and silicon-related materials have higher polar surface energies than SU-8...... been shown that the materials with higher surface energy have higher sticton/adhesion forces. The topography of surface influences the contact angle and stiction, and is also discussed in the paper....

  10. Characterization of Piezoelectric Energy Harvesting MEMS

    Science.gov (United States)

    2015-12-01

    of previously fabricated MEMS piezoelectric energy harvesters and use the results to optimize an advanced finite element model to be used in...possibilities of using solar power and the piezoelectric effect to harvest energy [12]. The design goal was to develop an energy harvester with a resonant... The piezoelectric properties of AlN are also relatively constant over a wide range of temperatures [7]. AlN was further characterized

  11. Fractal Structures For Fixed Mems Capacitors

    KAUST Repository

    Elshurafa, Amro M.

    2014-08-28

    An embodiment of a fractal fixed capacitor comprises a capacitor body in a microelectromechanical system (MEMS) structure. The capacitor body has a first plate with a fractal shape separated by a horizontal distance from a second plate with a fractal shape. The first plate and the second plate are within the same plane. Such a fractal fixed capacitor further comprises a substrate above which the capacitor body is positioned.

  12. Movable MEMS Devices on Flexible Silicon

    KAUST Repository

    Ahmed, Sally

    2013-05-05

    Flexible electronics have gained great attention recently. Applications such as flexible displays, artificial skin and health monitoring devices are a few examples of this technology. Looking closely at the components of these devices, although MEMS actuators and sensors can play critical role to extend the application areas of flexible electronics, fabricating movable MEMS devices on flexible substrates is highly challenging. Therefore, this thesis reports a process for fabricating free standing and movable MEMS devices on flexible silicon substrates; MEMS flexure thermal actuators have been fabricated to illustrate the viability of the process. Flexure thermal actuators consist of two arms: a thin hot arm and a wide cold arm separated by a small air gap; the arms are anchored to the substrate from one end and connected to each other from the other end. The actuator design has been modified by adding etch holes in the anchors to suit the process of releasing a thin layer of silicon from the bulk silicon substrate. Selecting materials that are compatible with the release process was challenging. Moreover, difficulties were faced in the fabrication process development; for example, the structural layer of the devices was partially etched during silicon release although it was protected by aluminum oxide which is not attacked by the releasing gas . Furthermore, the thin arm of the thermal actuator was thinned during the fabrication process but optimizing the patterning and etching steps of the structural layer successfully solved this problem. Simulation was carried out to compare the performance of the original and the modified designs for the thermal actuators and to study stress and temperature distribution across a device. A fabricated thermal actuator with a 250 μm long hot arm and a 225 μm long cold arm separated by a 3 μm gap produced a deflection of 3 μm before silicon release, however, the fabrication process must be optimized to obtain fully functioning

  13. Review on the Modeling of Electrostatic MEMS

    Directory of Open Access Journals (Sweden)

    Wan-Chun Chuang

    2010-06-01

    Full Text Available Electrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduces the physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices.

  14. Ultra-compact MEMS FTIR spectrometer

    Science.gov (United States)

    Sabry, Yasser M.; Hassan, Khaled; Anwar, Momen; Alharon, Mohamed H.; Medhat, Mostafa; Adib, George A.; Dumont, Rich; Saadany, Bassam; Khalil, Diaa

    2017-05-01

    Portable and handheld spectrometers are being developed and commercialized in the late few years leveraging the rapidly-progressing technology and triggering new markets in the field of on-site spectroscopic analysis. Although handheld devices were commercialized for the near-infrared spectroscopy (NIRS), their size and cost stand as an obstacle against the deployment of the spectrometer as spectral sensing components needed for the smart phone industry and the IoT applications. In this work we report a chip-sized microelectromechanical system (MEMS)-based FTIR spectrometer. The core optical engine of the solution is built using a passive-alignment integration technique for a selfaligned MEMS chip; self-aligned microoptics and a single detector in a tiny package sized about 1 cm3. The MEMS chip is a monolithic, high-throughput scanning Michelson interferometer fabricated using deep reactive ion etching technology of silicon-on-insulator substrate. The micro-optical part is used for conditioning the input/output light to/from the MEMS and for further light direction to the detector. Thanks to the all-reflective design of the conditioning microoptics, the performance is free of chromatic aberration. Complemented by the excellent transmission properties of the silicon in the infrared region, the integrated solution allows very wide spectral range of operation. The reported sensor's spectral resolution is about 33 cm-1 and working in the range of 1270 nm to 2700 nm; upper limited by the extended InGaAs detector. The presented solution provides a low cost, low power, tiny size, wide wavelength range NIR spectral sensor that can be manufactured with extremely high volumes. All these features promise the compatibility of this technology with the forthcoming demand of smart portable and IoT devices.

  15. Different grades MEMS accelerometers error characteristics

    Science.gov (United States)

    Pachwicewicz, M.; Weremczuk, J.

    2017-08-01

    The paper presents calibration effects of two different MEMS accelerometers of different price and quality grades and discusses different accelerometers errors types. The calibration for error determining is provided by reference centrifugal measurements. The design and measurement errors of the centrifuge are discussed as well. It is shown that error characteristics of the sensors are very different and it is not possible to use simple calibration methods presented in the literature in both cases.

  16. High temperature stable RF MEMS microwave switches

    OpenAIRE

    Klein, Stefan

    2010-01-01

    Im Rahmen dieser Arbeit wurden elektrostatisch angesteuerte RF-MEMS Schalter mit kapazitiver Kopplung entwickelt, die Prozesstemperaturen von 400°C und darüber hinaus ohne Verlust der Funktionstüchtigkeit überstehen. Als Funktionsmaterial wird einerseits eine AlSiCu und andererseits eine WTi Legierung verwendet. Das Schalterprinzip beruht auf dem Wanderkeileffekt, der einen gekrümmten Biegebalken nutzt. Diese Verbiegung weg von der Substratoberfläche, die durch einen wohldefinierten intri...

  17. Fractal Structures For Fixed Mems Capacitors

    KAUST Repository

    Elshurafa, Amro M.; Radwan, Ahmed Gomaa Ahmed; Emira, Ahmed A.; Salama, Khaled N.

    2014-01-01

    An embodiment of a fractal fixed capacitor comprises a capacitor body in a microelectromechanical system (MEMS) structure. The capacitor body has a first plate with a fractal shape separated by a horizontal distance from a second plate with a fractal shape. The first plate and the second plate are within the same plane. Such a fractal fixed capacitor further comprises a substrate above which the capacitor body is positioned.

  18. Using MEMS Capacitive Switches in Tunable RF Amplifiers

    OpenAIRE

    Danson John; Plett Calvin; Tait Niall

    2006-01-01

    A MEMS capacitive switch suitable for use in tunable RF amplifiers is described. A MEMS switch is designed, fabricated, and characterized with physical and RF measurements for inclusion in simulations. Using the MEMS switch models, a dual-band low-noise amplifier (LNA) operating at GHz and GHz, and a tunable power amplifier (PA) at GHz are simulated in m CMOS. MEMS switches allow the LNA to operate with 11 dB of isolation between the two bands while maintaining dB of gain and sub- dB no...

  19. Investigating ESD sensitivity in electrostatic SiGe MEMS

    International Nuclear Information System (INIS)

    Sangameswaran, Sandeep; De Coster, Jeroen; Linten, Dimitri; Scholz, Mirko; Thijs, Steven; Groeseneken, Guido; De Wolf, Ingrid

    2010-01-01

    The sensitivity of electrostatically actuated SiGe microelectromechanical systems to electrostatic discharge events has been investigated in this paper. Torsional micromirrors and RF microelectromechanical systems (MEMS) actuators have been used as two case studies to perform this study. On-wafer electrostatic discharge (ESD) measurement methods, such as the human body model (HBM) and machine model (MM), are discussed. The impact of HBM ESD zap tests on the functionality and behavior of MEMS is explained and the ESD failure levels of MEMS have been verified by failure analysis. It is demonstrated that electrostatic MEMS devices have a high sensitivity to ESD and that it is essential to protect them.

  20. Transmission X-ray mirror

    International Nuclear Information System (INIS)

    Lairson, B.M.; Bilderback, D.H.

    1982-01-01

    Transmission X-ray mirrors have been made from 400 A to 10 000 A thick soap films and have been shown to have novel properties. Using grazing angles of incidence, low energy X-rays were reflected from the front surface while more energetic X-rays were transmitted through the mirror largely unattenuated. A wide bandpass monochromator was made from a silicon carbide mirror followed by a soap film transmission mirror and operated in the white beam at the cornell High Energy Synchrotron Source (CHESS). Bandpasses of ΔE/E=12% to 18% were achieved at 13 keV with peak efficiencies estimated to be between 55% and 75%, respectively. Several wide angle scattering photographs of stretched polyethylene and a phospholipid were obtained in 10 s using an 18% bandpass. (orig.)

  1. Mirror symmetry and loop operators

    Energy Technology Data Exchange (ETDEWEB)

    Assel, Benjamin [Department of Mathematics, King’s College London,The Strand, London WC2R 2LS (United Kingdom); Gomis, Jaume [Perimeter Institute for Theoretical Physics,Waterloo, Ontario, N2L 2Y5 (Canada)

    2015-11-09

    Wilson loops in gauge theories pose a fundamental challenge for dualities. Wilson loops are labeled by a representation of the gauge group and should map under duality to loop operators labeled by the same data, yet generically, dual theories have completely different gauge groups. In this paper we resolve this conundrum for three dimensional mirror symmetry. We show that Wilson loops are exchanged under mirror symmetry with Vortex loop operators, whose microscopic definition in terms of a supersymmetric quantum mechanics coupled to the theory encode in a non-trivial way a representation of the original gauge group, despite that the gauge groups of mirror theories can be radically different. Our predictions for the mirror map, which we derive guided by branes in string theory, are confirmed by the computation of the exact expectation value of Wilson and Vortex loop operators on the three-sphere.

  2. A nuclear micro battery for Mems devices

    International Nuclear Information System (INIS)

    Lal, A.; Bilbao Y Leon, R.M.; Guo, H.; Li, H.; Santanam, S.; Yao, R.; Blanchard, J.; Henderson, D.

    2001-01-01

    Micro-electromechanical Systems (MEMS) have not gained wide use because they lack the on-device power required by many important applications. Several forms of energy could be considered to supply this needed power (solar, fossil fuels, etc), but nuclear sources provide an intriguing option in terms of power density and lifetime. This paper describes several approaches for establishing the viability of nuclear sources for powering realistic MEMS devices. Isotopes currently being used include alpha and low-energy beta emitters. The sources are in both solid and liquid form, and a technique for plating a solid source from a liquid source has been investigated. Several approaches are being explored for the production of MEMS power sources. The first concept is a junction-type battery. The second concept involves a more direct use of the charged particles produced by the decay: the creation of a resonator by inducing movement due to attraction or repulsion resulting from the collection of charged particles. Performance results are provided for each of these concepts. (authors)

  3. MEMS Micro-Valve for Space Applications

    Science.gov (United States)

    Chakraborty, I.; Tang, W. C.; Bame, D. P.; Tang, T. K.

    1998-01-01

    We report on the development of a Micro-ElectroMechanical Systems (MEMS) valve that is designed to meet the rigorous performance requirements for a variety of space applications, such as micropropulsion, in-situ chemical analysis of other planets, or micro-fluidics experiments in micro-gravity. These systems often require very small yet reliable silicon valves with extremely low leak rates and long shelf lives. Also, they must survive the perils of space travel, which include unstoppable radiation, monumental shock and vibration forces, as well as extreme variations in temperature. Currently, no commercial MEMS valve meets these requirements. We at JPL are developing a piezoelectric MEMS valve that attempts to address the unique problem of space. We begin with proven configurations that may seem familiar. However, we have implemented some major design innovations that should produce a superior valve. The JPL micro-valve is expected to have an extremely low leak rate, limited susceptibility to particulates, vibration or radiation, as well as a wide operational temperature range.

  4. A MEMS sensor for microscale force measurements

    International Nuclear Information System (INIS)

    Majcherek, S; Aman, A; Fochtmann, J

    2016-01-01

    This paper describes the development and testing of a new MEMS-based sensor device for microscale contact force measurements. A special MEMS cell was developed to reach higher lateral resolution than common steel-based load cells with foil-type strain gauges as mechanical-electrical converters. The design provided more than one normal force measurement point with spatial resolution in submillimeter range. Specific geometric adaption of the MEMS-device allowed adjustability of its measurement range between 0.5 and 5 N. The thin film nickel-chromium piezo resistors were used to achieve a mechanical-electrical conversion. The production process was realized by established silicon processing technologies such as deep reactive ion etching and vapor deposition (sputtering). The sensor was tested in two steps. Firstly, the sensor characteristics were carried out by application of defined loads at the measurement points by a push-pull tester. As a result, the sensor showed linear behavior. A measurement system analysis (MSA1) was performed to define the reliability of the measurement system. The measured force values had the maximal relative deviation of 1% to average value of 1.97 N. Secondly, the sensor was tested under near-industrial conditions. In this context, the thermal induced relaxation behavior of the electrical connector contact springs was investigated. The handling of emerging problems during the characterization process of the sensor is also described. (paper)

  5. Radioisotope Power Sources for MEMS Devices,

    International Nuclear Information System (INIS)

    Blanchard, J.P.

    2001-01-01

    Microelectromechanical systems (MEMS) comprise a rapidly expanding research field with potential applications varying from sensors in airbags to more recent optical applications. Depending on the application, these devices often require an on-board power source for remote operation, especially in cases requiring operation for an extended period of time. Previously suggested power sources include fossil fuels and solar energy, but nuclear power sources may provide significant advantages for certain applications. Hence, the objective of this study is to establish the viability of using radioisotopes to power realistic MEMS devices. A junction-type battery was constructed using silicon and a 63 Ni liquid source. A source volume containing 64 microCi provided a power of ∼0.07 nW. A more novel application of nuclear sources for MEMS applications involves the creation of a resonator that is driven by charge collection in a cantilever beam. Preliminary results have established the feasibility of this concept, and future work will optimize the design for various applications

  6. Design and simulation of the surface shape control system for membrane mirror

    Science.gov (United States)

    Zhang, Gengsheng; Tang, Minxue

    2009-11-01

    The surface shape control is one of the key technologies for the manufacture of membrane mirror. This paper presents a design of membrane mirror's surface shape control system on the basis of fuzzy logic control. The system contains such function modules as surface shape design, surface shape control, surface shape analysis, and etc. The system functions are realized by using hybrid programming technology of Visual C# and MATLAB. The finite element method is adopted to simulate the surface shape control of membrane mirror. The finite element analysis model is established through ANSYS Parametric Design Language (APDL). ANSYS software kernel is called by the system in background running mode when doing the simulation. The controller is designed by means of controlling the sag of the mirror's central crosssection. The surface shape of the membrane mirror and its optical aberration are obtained by applying Zernike polynomial fitting. The analysis of surface shape control and the simulation of disturbance response are performed for a membrane mirror with 300mm aperture and F/2.7. The result of the simulation shows that by using the designed control system, the RMS wavefront error of the mirror can reach to 142λ (λ=632.8nm), which is consistent to the surface accuracy of the membrane mirror obtained by the large deformation theory of membrane under the same condition.

  7. Mirror Neurons from Associative Learning

    OpenAIRE

    Catmur, Caroline; Press, Clare; Heyes, Cecilia

    2016-01-01

    Mirror neurons fire both when executing actions and observing others perform similar actions. Their sensorimotor matching properties have generally been considered a genetic adaptation for social cognition; however, in the present chapter we argue that the evidence in favor of this account is not compelling. Instead we present evidence supporting an alternative account: that mirror neurons’ matching properties arise from associative learning during individual development. Notably, this proces...

  8. MARS: Mirror Advanced Reactor Study

    International Nuclear Information System (INIS)

    Logan, B.G.

    1984-01-01

    A recently completed two-year study of a commercial tandem mirror reactor design [Mirror Advanced Reactor Study (MARS)] is briefly reviewed. The end plugs are designed for trapped particle stability, MHD ballooning, balanced geodesic curvature, and small radial electric fields in the central cell. New technologies such as lithium-lead blankets, 24T hybrid coils, gridless direct converters and plasma halo vacuum pumps are highlighted

  9. High-uniformity centimeter-wide Si etching method for MEMS devices with large opening elements

    Science.gov (United States)

    Okamoto, Yuki; Tohyama, Yukiya; Inagaki, Shunsuke; Takiguchi, Mikio; Ono, Tomoki; Lebrasseur, Eric; Mita, Yoshio

    2018-04-01

    We propose a compensated mesh pattern filling method to achieve highly uniform wafer depth etching (over hundreds of microns) with a large-area opening (over centimeter). The mesh opening diameter is gradually changed between the center and the edge of a large etching area. Using such a design, the etching depth distribution depending on sidewall distance (known as the local loading effect) inversely compensates for the over-centimeter-scale etching depth distribution, known as the global or within-die(chip)-scale loading effect. Only a single DRIE with test structure patterns provides a micro-electromechanical systems (MEMS) designer with the etched depth dependence on the mesh opening size as well as on the distance from the chip edge, and the designer only has to set the opening size so as to obtain a uniform etching depth over the entire chip. This method is useful when process optimization cannot be performed, such as in the cases of using standard conditions for a foundry service and of short turn-around-time prototyping. To demonstrate, a large MEMS mirror that needed over 1 cm2 of backside etching was successfully fabricated using as-is-provided DRIE conditions.

  10. Cost-effective method of manufacturing a 3D MEMS optical switch

    Science.gov (United States)

    Carr, Emily; Zhang, Ping; Keebaugh, Doug; Chau, Kelvin

    2009-02-01

    growth of data and video transport networks. All-optical switching eliminates the need for optical-electrical conversion offering the ability to switch optical signals transparently: independent of data rates, formats and wavelength. It also provides network operators much needed automation capabilities to create, monitor and protect optical light paths. To further accelerate the market penetration, it is necessary to identify a path to reduce the manufacturing cost significantly as well as enhance the overall system performance, uniformity and reliability. Currently, most MEMS optical switches are assembled through die level flip-chip bonding with either epoxies or solder bumps. This is due to the alignment accuracy requirements of the switch assembly, defect matching of individual die, and cost of the individual components. In this paper, a wafer level assembly approach is reported based on silicon fusion bonding which aims to reduce the packaging time, defect count and cost through volume production. This approach is successfully demonstrated by the integration of two 6-inch wafers: a mirror array wafer and a "snap-guard" wafer, which provides a mechanical structure on top of the micromirror to prevent electrostatic snap-down. The direct silicon-to-silicon bond eliminates the CTEmismatch and stress issues caused by non-silicon bonding agents. Results from a completed integrated switch assembly will be presented, which demonstrates the reliability and uniformity of some key parameters of this MEMS optical switch.

  11. Advances in telescope mirror cleaning

    Science.gov (United States)

    Blanken, Maarten F.; Chopping, Alan K.; Dee, Kevin M.

    2004-09-01

    Metrology and cleaning techniques for telescope mirrors are generally well established. CO2 cleaning and water washing are mainly used. Water washing has proven to be the best method of removing oil and water stains and restoring the aluminium to nearly fresh values. The risk of water getting to unwanted places such as electronics or other optics prevents this method from being employed more often. Recently the Isaac Newton Group introduced a new cleaning technique for their telescope mirrors, which reduces the risks discussed above. This technique uses water vapour instead of water to wash the mirror. The advantage of this method is that the amount of water needed is drastically reduced. In addition the pressure of the vapour will blow away any large dust particles on the mirror and the temperature shock between the vapour and the mirror will help to de-bond the dust particles. Adding a soapy solution will help to clean oil and watermarks of the mirror. This paper describes the vapour cleaning method, tests that have been done and the overall findings.

  12. Evolution of the mirror machine

    International Nuclear Information System (INIS)

    Damm, C.C.

    1983-01-01

    The history of the magnetic-mirror approach to a fusion reactor is primarily the history of our understanding and control of several crucial physics issues, coupled with progress in the technology of heating and confining a reacting plasma. The basic requirement of an MHD-stable plasma equilibrium was achieved following the early introduction of minimum-B multipolar magnetic fields. In refined form, the same magnetic-well principle carries over to our present experiments and to reactor designs. The higher frequency microinstabilities, arising from the non-Maxwellian particle distributions inherent in mirror machines, have gradually come under control as theoretical prescriptions for distribution functions have been applied in the experiments. Even with stability, the classical plasma leakage through the mirrors posed a serious question for reactor viability until the principle of electrostatic axial stoppering was applied in the tandem mirror configuration. Experiments to test this principle successfully demonstrated the substantial improvement in confinement predicted. Concurrent with advances in mirror plasma physics, development of both high-power neutral beam injectors and high-speed vacuum pumping techniques has played a crucial role in ongoing experiments. Together with superconducting magnets, cryogenic pumping, and high-power radiofrequency heating, these technologies have evolved to a level that extrapolates readily to meet the requirements of a tandem mirror fusion reactor

  13. Issues facing the U. S. mirror program

    Energy Technology Data Exchange (ETDEWEB)

    George, T.V.

    1978-07-01

    Some of the current issues associated with the U.S. Magnetic Mirror Program are analyzed. They are presented as five separate papers entitled: (1) Relevant Issues Broughtup by the Mirror Reactor Design Studies. (2) An Assessment of the Design Study of the 1 MeV Neutral Beam Injector Required for a Tandem Mirror Reactor. (3) The Significance of the Radial Plasma Size Measured in Units of Ion Gyroradii in Tandem Mirrors and Field Reversed Mirrors. (4) Producing Field Reversed Mirror Plasmas by Methods used in Field Reversed Theta Pinch. (5) RF Stoppering of Mirror Confined Plasma.

  14. A capacitive CMOS-MEMS sensor designed by multi-physics simulation for integrated CMOS-MEMS technology

    Science.gov (United States)

    Konishi, Toshifumi; Yamane, Daisuke; Matsushima, Takaaki; Masu, Kazuya; Machida, Katsuyuki; Toshiyoshi, Hiroshi

    2014-01-01

    This paper reports the design and evaluation results of a capacitive CMOS-MEMS sensor that consists of the proposed sensor circuit and a capacitive MEMS device implemented on the circuit. To design a capacitive CMOS-MEMS sensor, a multi-physics simulation of the electromechanical behavior of both the MEMS structure and the sensing LSI was carried out simultaneously. In order to verify the validity of the design, we applied the capacitive CMOS-MEMS sensor to a MEMS accelerometer implemented by the post-CMOS process onto a 0.35-µm CMOS circuit. The experimental results of the CMOS-MEMS accelerometer exhibited good agreement with the simulation results within the input acceleration range between 0.5 and 6 G (1 G = 9.8 m/s2), corresponding to the output voltages between 908.6 and 915.4 mV, respectively. Therefore, we have confirmed that our capacitive CMOS-MEMS sensor and the multi-physics simulation will be beneficial method to realize integrated CMOS-MEMS technology.

  15. Mechanical properties of MEMS materials: reliability investigations by mechanical- and HRXRD-characterization related to environmental testing

    Science.gov (United States)

    Bandi, T.; Shea, H.; Neels, A.

    2014-06-01

    The performance and aging of MEMS often rely on the stability of the mechanical properties over time and under harsh conditions. An overview is given on methods to investigate small variations of the mechanical properties of structural MEMS materials by functional characterization, high-resolution x-ray diffraction methods (HR-XRD) and environmental testing. The measurement of the dynamical properties of micro-resonators is a powerful method for the investigation of elasticity variations in structures relevant to microtechnology. X-ray diffraction techniques are used to analyze residual strains and deformations with high accuracy and in a non-destructive manner at surfaces and in buried micro-structures. The influence of elevated temperatures and radiation damage on the performance of resonant microstructures with a focus on quartz and single crystal silicon is discussed and illustrated with examples including work done in our laboratories at CSEM and EPFL.

  16. Experimental verification of a novel MEMS multi-modal vibration energy harvester for ultra-low power remote sensing nodes

    Science.gov (United States)

    Iannacci, J.; Sordo, G.; Serra, E.; Kucera, M.; Schmid, U.

    2015-05-01

    In this work, we discuss the verification and preliminary experimental characterization of a MEMS-based vibration Energy Harvester (EH) design. The device, named Four-Leaf Clover (FLC), is based on a circular-shaped mechanical resonator with four petal-like mass-spring cascaded systems. This solution introduces several mechanical Degrees of Freedom (DOFs), and therefore enables multiple resonant modes and deformation shapes in the vibrations frequency range of interest. The target is to realize a wideband multi-modal EH-MEMS device, that overcomes the typical narrowband working characteristics of standard cantilevered EHs, by ensuring flexible and adaptable power source to ultra-low power electronics for integrated remote sensing nodes (e.g. Wireless Sensor Networks - WSNs) in the Internet of Things (IoT) scenario, aiming to self-powered and energy autonomous smart systems. Finite Element Method simulations of the FLC EH-MEMS show the presence of several resonant modes for vibrations up to 4-5 kHz, and level of converted power up to a few μW at resonance and in closed-loop conditions (i.e. with resistive load). On the other hand, the first experimental tests of FLC fabricated samples, conducted with a Laser Doppler Vibrometer (LDV), proved the presence of several resonant modes, and allowed to validate the accuracy of the FEM modeling method. Such a good accordance holds validity for what concerns the coupled field behavior of the FLC EH-MEMS, as well. Both measurements and simulations performed at 190 Hz (i.e. out of resonance) showed the generation of power in the range of nW (Root Mean Square - RMS values). Further steps of this work will include the experimental characterization in a full range of vibrations, aiming to prove the whole functionality of the FLC EH-MEMS proposed design concept.

  17. Space Active Optics: toward optimized correcting mirrors for future large spaceborne observatories

    Science.gov (United States)

    Laslandes, Marie; Hugot, Emmanuel; Ferrari, Marc; Lemaitre, Gérard; Liotard, Arnaud

    2011-10-01

    Wave-front correction in optical instruments is often needed, either to compensate Optical Path Differences, off-axis aberrations or mirrors deformations. Active optics techniques are developed to allow efficient corrections with deformable mirrors. In this paper, we will present the conception of particular deformation systems which could be used in space telescopes and instruments in order to improve their performances while allowing relaxing specifications on the global system stability. A first section will be dedicated to the design and performance analysis of an active mirror specifically designed to compensate for aberrations that might appear in future 3m-class space telescopes, due to lightweight primary mirrors, thermal variations or weightless conditions. A second section will be dedicated to a brand new design of active mirror, able to compensate for given combinations of aberrations with a single actuator. If the aberrations to be corrected in an instrument and their evolutions are known in advance, an optimal system geometry can be determined thanks to the elasticity theory and Finite Element Analysis.

  18. Study on a Two-Dimensional Scanning Micro-Mirror and Its Application in a MOEMS Target Detector

    Directory of Open Access Journals (Sweden)

    Hu Huang

    2010-07-01

    Full Text Available A two-dimensional (2D scanning micro-mirror for target detection and measurement has been developed. This new micro-mirror is used in a MOEMS target detector to replace the conventional scanning detector. The micro-mirror is fabricated by MEMS process and actuated by a piezoelectric actuator. To achieve large deflection angles, the micro-mirror is excited in the resonance modes. It has two degrees of freedom and changes the direction of the emitted laser beam for a regional 2D scanning. For the deflection angles measurement, piezoresistors are integrated in the micro-mirror and the deflection angles of each direction can be detected independently and precisely. Based on the scanning micro-mirror and the phase-shift ranging technology, a MOEMS target detector has been developed in a size of 90 mm × 35 mm × 50 mm. The experiment shows that the target can be detected in the scanning field and the relative range and orientation can be measured by the MOEMS target detector. For the target distance up to 3 m with a field of view about 20º × 20º, the measurement resolution is about 10.2 cm in range, 0.15º in the horizontal direction and 0.22º in the vertical direction for orientation.

  19. Study on a two-dimensional scanning micro-mirror and its application in a MOEMS target detector.

    Science.gov (United States)

    Zhang, Chi; You, Zheng; Huang, Hu; Li, Guanhua

    2010-01-01

    A two-dimensional (2D) scanning micro-mirror for target detection and measurement has been developed. This new micro-mirror is used in a MOEMS target detector to replace the conventional scanning detector. The micro-mirror is fabricated by MEMS process and actuated by a piezoelectric actuator. To achieve large deflection angles, the micro-mirror is excited in the resonance modes. It has two degrees of freedom and changes the direction of the emitted laser beam for a regional 2D scanning. For the deflection angles measurement, piezoresistors are integrated in the micro-mirror and the deflection angles of each direction can be detected independently and precisely. Based on the scanning micro-mirror and the phase-shift ranging technology, a MOEMS target detector has been developed in a size of 90 mm × 35 mm × 50 mm. The experiment shows that the target can be detected in the scanning field and the relative range and orientation can be measured by the MOEMS target detector. For the target distance up to 3 m with a field of view about 20° × 20°, the measurement resolution is about 10.2 cm in range, 0.15° in the horizontal direction and 0.22° in the vertical direction for orientation.

  20. Bunionette deformity.

    Science.gov (United States)

    Cohen, Bruce E; Nicholson, Christopher W

    2007-05-01

    The bunionette, or tailor's bunion, is a lateral prominence of the fifth metatarsal head. Most commonly, bunionettes are the result of a widened 4-5 intermetatarsal angle with associated varus of the metatarsophalangeal joint. When symptomatic, these deformities often respond to nonsurgical treatment methods, such as wider shoes and padding techniques. When these methods are unsuccessful, surgical treatment is based on preoperative radiographs and associated lesions, such as hyperkeratoses. In rare situations, a simple lateral eminence resection is appropriate; however, the risk of recurrence or overresection is high with this technique. Patients with a lateral bow to the fifth metatarsal are treated with a distal chevron-type osteotomy. A widened 4-5 intermetatarsal angle often requires a diaphyseal osteotomy for correction.

  1. Review of Automated Design and Optimization of MEMS

    DEFF Research Database (Denmark)

    Achiche, Sofiane; Fan, Zhun; Bolognini, Francesca

    2007-01-01

    carried out. This paper presents a review of these techniques. The design task of MEMS is usually divided into four main stages: System Level, Device Level, Physical Level and the Process Level. The state of the art o automated MEMS design in each of these levels is investigated....

  2. Buffering Implications for the Design Space of Streaming MEMS Storage

    NARCIS (Netherlands)

    Khatib, M.G.; Abelmann, Leon; Preas, Kathy

    2011-01-01

    Emerging nanotechnology-based systems encounter new non-functional requirements. This work addresses MEMS storage, an emerging technology that promises ultrahigh density and energy-efficient storage devices. We study the buffering requirement of MEMS storage in streaming applications. We show that

  3. Stability, Nonlinearity and Reliability of Electrostatically Actuated MEMS Devices

    Directory of Open Access Journals (Sweden)

    Di Chen

    2007-05-01

    Full Text Available Electrostatic micro-electro-mechanical system (MEMS is a special branch with a wide range of applications in sensing and actuating devices in MEMS. This paper provides a survey and analysis of the electrostatic force of importance in MEMS, its physical model, scaling effect, stability, nonlinearity and reliability in detail. It is necessary to understand the effects of electrostatic forces in MEMS and then many phenomena of practical importance, such as pull-in instability and the effects of effective stiffness, dielectric charging, stress gradient, temperature on the pull-in voltage, nonlinear dynamic effects and reliability due to electrostatic forces occurred in MEMS can be explained scientifically, and consequently the great potential of MEMS technology could be explored effectively and utilized optimally. A simplified parallel-plate capacitor model is proposed to investigate the resonance response, inherent nonlinearity, stiffness softened effect and coupled nonlinear effect of the typical electrostatically actuated MEMS devices. Many failure modes and mechanisms and various methods and techniques, including materials selection, reasonable design and extending the controllable travel range used to analyze and reduce the failures are discussed in the electrostatically actuated MEMS devices. Numerical simulations and discussions indicate that the effects of instability, nonlinear characteristics and reliability subjected to electrostatic forces cannot be ignored and are in need of further investigation.

  4. Nonlinear Adaptive Filter for MEMS Gyro Error Cancellation

    Data.gov (United States)

    National Aeronautics and Space Administration — Thermal biases are the dominate error in low-cost low-power small MEMS gyros. CubeSats often can't afford the power/mass to put a heater on their MEMS gyros and...

  5. RF-MEMS capacitive switches with high reliability

    Science.gov (United States)

    Goldsmith, Charles L.; Auciello, Orlando H.; Carlisle, John A.; Sampath, Suresh; Sumant, Anirudha V.; Carpick, Robert W.; Hwang, James; Mancini, Derrick C.; Gudeman, Chris

    2013-09-03

    A reliable long life RF-MEMS capacitive switch is provided with a dielectric layer comprising a "fast discharge diamond dielectric layer" and enabling rapid switch recovery, dielectric layer charging and discharging that is efficient and effective to enable RF-MEMS switch operation to greater than or equal to 100 billion cycles.

  6. Measurement of copper vapour laser-induced deformation of ...

    Indian Academy of Sciences (India)

    2014-02-14

    Feb 14, 2014 ... Laser & Plasma Technology Division, Beam Technology Development Group,. Bhabha Atomic ... of dielectric-coated mirror, caused by an incident repetitive pulsed laser beam with high average power. Minimum ... the optical surface deformation, caused by irradiation by a copper vapour laser (CVL) beam.

  7. The mirror-neuron system.

    Science.gov (United States)

    Rizzolatti, Giacomo; Craighero, Laila

    2004-01-01

    A category of stimuli of great importance for primates, humans in particular, is that formed by actions done by other individuals. If we want to survive, we must understand the actions of others. Furthermore, without action understanding, social organization is impossible. In the case of humans, there is another faculty that depends on the observation of others' actions: imitation learning. Unlike most species, we are able to learn by imitation, and this faculty is at the basis of human culture. In this review we present data on a neurophysiological mechanism--the mirror-neuron mechanism--that appears to play a fundamental role in both action understanding and imitation. We describe first the functional properties of mirror neurons in monkeys. We review next the characteristics of the mirror-neuron system in humans. We stress, in particular, those properties specific to the human mirror-neuron system that might explain the human capacity to learn by imitation. We conclude by discussing the relationship between the mirror-neuron system and language.

  8. Metamaterial mirrors in optoelectronic devices

    KAUST Repository

    Esfandyarpour, Majid

    2014-06-22

    The phase reversal that occurs when light is reflected from a metallic mirror produces a standing wave with reduced intensity near the reflective surface. This effect is highly undesirable in optoelectronic devices that use metal films as both electrical contacts and optical mirrors, because it dictates a minimum spacing between the metal and the underlying active semiconductor layers, therefore posing a fundamental limit to the overall thickness of the device. Here, we show that this challenge can be circumvented by using a metamaterial mirror whose reflection phase is tunable from that of a perfect electric mirror († = €) to that of a perfect magnetic mirror († = 0). This tunability in reflection phase can also be exploited to optimize the standing wave profile in planar devices to maximize light-matter interaction. Specifically, we show that light absorption and photocurrent generation in a sub-100 nm active semiconductor layer of a model solar cell can be enhanced by ∼20% over a broad spectral band. © 2014 Macmillan Publishers Limited.

  9. Metamaterial mirrors in optoelectronic devices

    KAUST Repository

    Esfandyarpour, Majid; Garnett, Erik C.; Cui, Yi; McGehee, Michael D.; Brongersma, Mark L.

    2014-01-01

    The phase reversal that occurs when light is reflected from a metallic mirror produces a standing wave with reduced intensity near the reflective surface. This effect is highly undesirable in optoelectronic devices that use metal films as both electrical contacts and optical mirrors, because it dictates a minimum spacing between the metal and the underlying active semiconductor layers, therefore posing a fundamental limit to the overall thickness of the device. Here, we show that this challenge can be circumvented by using a metamaterial mirror whose reflection phase is tunable from that of a perfect electric mirror († = €) to that of a perfect magnetic mirror († = 0). This tunability in reflection phase can also be exploited to optimize the standing wave profile in planar devices to maximize light-matter interaction. Specifically, we show that light absorption and photocurrent generation in a sub-100 nm active semiconductor layer of a model solar cell can be enhanced by ∼20% over a broad spectral band. © 2014 Macmillan Publishers Limited.

  10. Vertex algebras and mirror symmetry

    International Nuclear Information System (INIS)

    Borisov, L.A.

    2001-01-01

    Mirror Symmetry for Calabi-Yau hypersurfaces in toric varieties is by now well established. However, previous approaches to it did not uncover the underlying reason for mirror varieties to be mirror. We are able to calculate explicitly vertex algebras that correspond to holomorphic parts of A and B models of Calabi-Yau hypersurfaces and complete intersections in toric varieties. We establish the relation between these vertex algebras for mirror Calabi-Yau manifolds. This should eventually allow us to rewrite the whole story of toric mirror symmetry in the language of sheaves of vertex algebras. Our approach is purely algebraic and involves simple techniques from toric geometry and homological algebra, as well as some basic results of the theory of vertex algebras. Ideas of this paper may also be useful in other problems related to maps from curves to algebraic varieties.This paper could also be of interest to physicists, because it contains explicit description of holomorphic parts of A and B models of Calabi-Yau hypersurfaces and complete intersections in terms of free bosons and fermions. (orig.)

  11. Multiple-mirror plasma confinement

    International Nuclear Information System (INIS)

    Lichtenberg, A.J.; Lieberman, M.A.; Logan, B.G.

    1975-01-01

    A large enhancement of the confinement time can be achieved in a straight system of multiple mirrors over an equal length uniform magnetic field. The scaling is diffusive rather than that of flow, thereby scaling the square of the system length rather than linear with system length. Probably the most economic mode of operation for a reactor occurs when lambda/M is approximately l/sub c/, where lambda is the mean free path, M the mirror ratio, and l/sub c/ the length between mirrors; but where the scale length of the mirror field l/sub m/ is much less than lambda. The axial confinement time has been calculated theoretically and numerically for all important parameter regimes, and confirmed experimentally. A typical reactor calculation gives Q/sub E/ = 2 for a 400 meter system with 3000 MW(e) output. The main concern of a multiple-mirror system is stability. Linked quadrupoles can achieve average minimum-B stabilization of flute modes, and experiments have demonstrated this stabilization. Localized instabilities at finite β and enhanced diffusion resulting from the distorted flux surfaces and possibly from turbulent higher order modes still remain to be investigated

  12. Advantages of PZT thick film for MEMS sensors

    DEFF Research Database (Denmark)

    Hindrichsen, Christian Carstensen; Lou-Moller, R.; Hansen, K.

    2010-01-01

    For all MEMS devices a high coupling between the mechanical and electrical domain is desired. Figures of merit describing the coupling are important for comparing different piezoelectric materials. The existing figures of merit are discussed and a new figure of merit is introduced for a fair comp....... Improved figure of merit is reached in the piezoelectric PZT thick film, TF2100CIP, by using cold isostatic pressure in the PZT preparation process. The porosity of TF2100 is decreased 38%, hence, allowing an increase of charge sensitivity for MEMS sensors of 59%....... thin film and PZT thick film. It is shown that MEMS sensors with the PZT thick film TF2100 from InSensor A/S have potential for significant higher voltage sensitivities compared to PZT thin film base MEMS sensors when the total thickness of the MEMS cantilever, beam, bridge or membrane is high...

  13. Using MEMS Capacitive Switches in Tunable RF Amplifiers

    Directory of Open Access Journals (Sweden)

    Danson John

    2006-01-01

    Full Text Available A MEMS capacitive switch suitable for use in tunable RF amplifiers is described. A MEMS switch is designed, fabricated, and characterized with physical and RF measurements for inclusion in simulations. Using the MEMS switch models, a dual-band low-noise amplifier (LNA operating at GHz and GHz, and a tunable power amplifier (PA at GHz are simulated in m CMOS. MEMS switches allow the LNA to operate with 11 dB of isolation between the two bands while maintaining dB of gain and sub- dB noise figure. MEMS switches are used to implement a variable matching network that allows the PA to realize up to 37% PAE improvement at low input powers.

  14. New dynamic silicon photonic components enabled by MEMS technology

    Science.gov (United States)

    Errando-Herranz, Carlos; Edinger, Pierre; Colangelo, Marco; Björk, Joel; Ahmed, Samy; Stemme, Göran; Niklaus, Frank; Gylfason, Kristinn B.

    2018-02-01

    Silicon photonics is the study and application of integrated optical systems which use silicon as an optical medium, usually by confining light in optical waveguides etched into the surface of silicon-on-insulator (SOI) wafers. The term microelectromechanical systems (MEMS) refers to the technology of mechanics on the microscale actuated by electrostatic actuators. Due to the low power requirements of electrostatic actuation, MEMS components are very power efficient, making them well suited for dense integration and mobile operation. MEMS components are conventionally also implemented in silicon, and MEMS sensors such as accelerometers, gyros, and microphones are now standard in every smartphone. By combining these two successful technologies, new active photonic components with extremely low power consumption can be made. We discuss our recent experimental work on tunable filters, tunable fiber-to-chip couplers, and dynamic waveguide dispersion tuning, enabled by the marriage of silicon MEMS and silicon photonics.

  15. Design of the science-fold mirrors for the Gemini telescopes

    Science.gov (United States)

    Peschel, Thomas; Damm, Christoph; Heilemann, Wolfgang

    2000-07-01

    As a part of the Acquisition and Guidance Unit for the Gemini project a light-weight, 50 cm flat mirror has been designed at the Fraunhofer Institute for Applied Optics and Precision Mechanics in Jena as a subcontractor of the Carl Zeiss Jena company. A light-weight design of the mirror and its mount was essential since the total mass of the whole assembly including the positioning system was limited to 50 kg while interferometric quality of the mirror surface was required for arbitrary orientation. The overall surface error was below 54 nm r.m.s. while 27 nm was achieved in the central part. The mirror was fabricated from low-expansion glass ceramics to avoid thermally induced deformations. By milling pockets into its rear surface the mass of the mirror was reduced by 70%. The mirror is mounted cinematically via six solid-state hinges to three steel levers. The levers are connected to the mount frame at their centers via ball-and- sphere joints. This arrangement determines the position of the mirror uniquely while it allows for the thermal expansion of the mount frame. The position of the mirror as well as its tilt around an axis perpendicular to the optical one may be controlled a precision of 20 micrometers and 3 arcsec, respectively. The tilt axis is driven directly by two high- torque motors. To avoid an excessive power consumption of the motors the torque of the mirror head to be compensated for by a counterweight mechanism. The mirror may be deployed into the optical path using spindle driven linear rails.

  16. A nuclear micro battery for Mems devices

    International Nuclear Information System (INIS)

    Blanchard, J.; Lal, A.; Henderson, D.; Bilbao Y Leon, R.; Guo, H.; Li, H.; Santanam, S.; Yao, R.

    2001-01-01

    Micro-electromechanical Systems (MEMS) have not gained wide use because they lack the on-device power required by many important applications. Several forms of energy could be considered to supply this needed power (solar, fossil fuels, etc), but nuclear sources provide an intriguing option in terms of power density and lifetime. This paper describes several approaches for establishing the viability of nuclear sources for powering realistic MEMS devices. Isotopes currently being used include low-energy beta emitters (solid and liquid) and alpha emitters (solid). Several approaches are being explored for the production of MEMS power sources. The first concept is a junction-type battery. In this case, the charged particles emitted from the decay of the radioisotopes are absorbed by a semiconductor and dissipate most of their energy as ionization of the atoms in the solid. The carriers generated in this fashion are in excess of the number permitted by thermodynamic equilibrium and, if they diffuse to the vicinity of a rectifying junction, induce a voltage across the junction. The second concept involves a more direct use of the charged particles produced by the decay: the creation of a resonator by inducing movement due to attraction or repulsion resulting from the collection of charged particles. As the charge is collected, the deflection of a cantilever beam increases until it contacts a grounded element, thus discharging the beam and causing it to return to its original position. This process will repeat as long as the source is active. One final concept relies on temperature gradients produced by the sources, along with appropriate insulation, to create power using a Peltier device. The source is isolated in order to allow it to reach sufficient temperatures, and the temperature difference between the source and the rest of the device is exploited using the Peltier effect. Performance results will be provided for each of these concepts. (author)

  17. Anomalous transport in mirror systems

    International Nuclear Information System (INIS)

    Post, R.F.

    1979-01-01

    As now being explored for fusion applications confinement systems based on the mirror principle embody two kinds of plasma regimes. These two regimes are: (a) high-beta plasmas, stabilized against MHD and other low frequency plasma instabilities by magnetic-well fields, but characterized by non-Maxwellian ion distributions; (b) near-Maxwellian plasmas, confined electrostatically (as in the tandem mirror) or in a field-reversed region within the mirror cell. Common to both situations are the questions of anomalous transport owing to high frequency instabilities in the non-maxwellian portions of the plasmas. This report will summarize the status of theory and of experimental data bearing on these questions, with particular reference to the high temperature regimes of interest for fusion power

  18. Prospects for MEMS in the Automotive Industry

    Directory of Open Access Journals (Sweden)

    Richard DIXON

    2007-12-01

    Full Text Available An automotive sector as a growth market for MEMS sensors is analyzed in the article. The automotive sector accounted for $1.6 billion, making this the second biggest opportunity after IT peripherals and inkjet print heads. By 2011 the market will top $2.2 billion, a CAGR of around 7%. The main applications in revenues terms are, in order, pressure sensors, gyroscopes, accelerometers and flow sensors and this will remain so for the foreseeable future. Automotive companies are forced to innovate as a result of competition and price pressures.

  19. MEMS-Reconfigurable Metamaterials and Antenna Applications

    Directory of Open Access Journals (Sweden)

    Tomislav Debogovic

    2014-01-01

    Full Text Available This paper reviews some of our contributions to reconfigurable metamaterials, where dynamic control is enabled by microelectromechanical systems (MEMS technology. First, we show reconfigurable composite right-/left-handed transmission lines (CRLH-TLs having state of the art phase velocity variation and loss, thereby enabling efficient reconfigurable phase shifters and leaky-wave antennas (LWA. Second, we present very low loss metasurface designs with reconfigurable reflection properties, applicable in reflectarrays and partially reflective surface (PRS antennas. All the presented devices have been fabricated and experimentally validated. They operate in X- and Ku-bands.

  20. Failure and fracture of thin film materials for MEMS

    Science.gov (United States)

    Jonnalagadda, Krishna Nagasai

    Design and reliable operation of Microelectromechanical systems (MEMS) depend on the material parameters that influence the failure and fracture properties of brittle and metallic thin films. Failure in brittle materials is quantified by the onset of catastrophic fracture, while in metals, the onset of inelastic deformation is considered as failure as it increases the material compliance. This dissertation research developed new experimental methods to address three aspects on the failure response of these two categories of materials: (a) the role of microstructure and intrinsic stress gradients in the opening mode fracture of mathematically sharp pre-cracks in amorphous and polycrystalline brittle thin films, (b) the critical conditions for mixed mode I/II pre-cracks and their comparison with linear elastic fracture mechanics (LEFM) criteria for crack initiation in homogeneous materials, and (c) the strain rate sensitivity of textured nanocrystalline Au and Pt films with grain sizes of 38 nm and 25 nm respectively. One of the technical objectives of this research was to develop experimental methods and tools that could become standards in MEMS and thin film experimental mechanics. In this regard, a new method was introduced to conduct mode I and mixed mode I/II fracture studies with microscale thin film specimens containing sharp edge pre-cracks. The mode I experiments permitted the direct application of LEFM handbook solutions. On the other hand, the newly introduced mixed mode I/II experiments in thin films were conducted by establishing a new protocol that employs non-standard oblique edge pre-cracks and a numerical analysis based on the J-integral to calculate the stress intensity factors. Similarly, a new experimental protocol has been implemented to carry out experiments with metallic thin films at strain rates that vary by more than six orders of magnitude. The results of mode I fracture experiments concluded that grain inhomogeneity in polycrystalline

  1. Generation of atto-second pulses on relativistic mirror plasma

    International Nuclear Information System (INIS)

    Vincenti, H.

    2012-12-01

    When an ultra intense femtosecond laser (I > 10 16 W.cm -2 ) with high contrast is focused on a solid target, the laser field at focus is high enough to completely ionize the target surface during the rising edge of the laser pulse and form a plasma. This plasma is so dense (the electron density is of the order of hundred times the critical density) that it completely reflects the incident laser beam in the specular direction: this is the so-called 'plasma mirror'. When laser intensity becomes very high, the non-linear response of the plasma mirror to the laser field periodically deforms the incident electric field leading to high harmonic generation in the reflected beam. In the temporal domain this harmonic spectrum is associated to a train of atto-second pulses. The goals of my work were to get a better comprehension of the properties of harmonic beams produced on plasma mirrors and design new methods to control theses properties, notably in order to produce isolated atto-second pulses instead of trains. Initially, we imagined and modeled the first realistic technique to generate isolated atto-second on plasma mirrors. This brand new approach is based on a totally new physical effect: 'the atto-second lighthouse effect'. Its principle consists in sending the atto-second pulses of the train in different directions and selects one of these pulses by putting a slit in the far field. Despite its simplicity, this technique is very general and applies to any high harmonic generation mechanism. Moreover, the atto-second lighthouse effect has many other applications (e.g in metrology). In particular, it paves the way to atto-second pump-probe experiments. Then, we studied the spatial properties of these harmonics, whose control and characterization are crucial if one wants to use this source in future application experiments. For instance, we need to control very precisely the harmonic beam divergence in order to achieve the atto-second lighthouse effect and get

  2. The alignment and isostatic mount bonding technique of the aerospace Cassegrain telescope primary mirror

    Science.gov (United States)

    Lin, Wei Cheng; Chang, Shenq-Tsong; Lin, Yu-Chuan; Hsu, Ming-Ying; Chang, Yu-Ting; Chang, Sheng-Hsiung; Huang, Ting-Ming

    2012-10-01

    In order to meet both optical performance and structural stiffness requirements of the aerospace Cassegrain telescope, iso-static mount is used as the interface between the primary mirror and the main plate. This article describes the alignment and iso-static mount bonding technique of the primary mirror by assistance of CMM. The design and assembly of mechanical ground support equipment (MGSE) which reduces the deformation of primary mirror by the gravity effect is also presented. The primary mirror adjusting MGSE consists of X-Y linear translation stages, rotation stage and kinematic constrain platform which provides the function of decenter, orientation, tilt and height adjustment of the posture sequentially. After CMM measurement, the radius of curvature, conic constant, decenter and tilt, etc. will be calculated. According to these results, the posture of the mirror will be adjusted to reduce the tilt by the designed MGSE within 0.02 degrees and the distance deviation from the best fitted profile of mirror to main plate shall be less than 0.01 mm. After that, EC 2216 adhesive is used to bond mirror and iso-static mount. During iso-static mount bonding process, CMM is selected to monitor the relative position deviation of the iso-static mount until the adhesive completely cured. After that, the wave front sensors and strain gauges are used to monitor the strain variation while the iso-static mount mounted in the main plate with the screws by the torque wrench. This step is to prevent deformation of the mirror caused from force of the iso-static mount during the mounting process. In the end, the interferometer is used for the optical performance test with +1G and -1G to check the alignment and bonding technique is well or not.

  3. Fokker-Planck equation in mirror research

    International Nuclear Information System (INIS)

    Post, R.F.

    1983-01-01

    Open confinement systems based on the magnetic mirror principle depend on the maintenance of particle distributions that may deviate substantially from Maxwellian distributions. Mirror research has therefore from the beginning relied on theoretical predictions of non-equilibrium rate processes obtained from solutions to the Fokker-Planck equation. The F-P equation plays three roles: Design of experiments, creation of classical standards against which to compare experiment, and predictions concerning mirror based fusion power systems. Analytical and computational approaches to solving the F-P equation for mirror systems will be reviewed, together with results and examples that apply to specific mirror systems, such as the tandem mirror

  4. Neoclassical resonant transport of a mirror cell

    International Nuclear Information System (INIS)

    Ito, T.; Katanuma, I.

    2005-01-01

    The neoclassical resonant plateau transport in a mirror cell is studied theoretically. The analytical expression for a non-square-well magnetic field is obtained. The analytical result is applied to the GAMMA10 tandem mirror [T. Cho, M. Yoshida, J. Kohagura et al., Phys. Rev. Lett. 94, 085002-1 (2005)], which consists of several mirror cells in it, and the confinement time due to the neoclassical resonant plateau transport is determined in each mirror cell. It is found that the neoclassical resonant transport of ions trapped in the nonaxisymmetric anchor mirror cell and transition mirror cells is significantly smaller than those trapped in the central cell

  5. Determination of tolerances of mirror displacement and radiator gas impurity for the CBM RICH detector

    Energy Technology Data Exchange (ETDEWEB)

    Adamczewski-Musch, J. [GSI Darmstadt (Germany); Becker, K.-H. [University Wuppertal (Germany); Belogurov, S. [ITEP Moscow (Russian Federation); Boldyreva, N. [PNPI Gatchina (Russian Federation); Chernogorov, A. [ITEP Moscow (Russian Federation); Deveaux, C. [University Gießen (Germany); Dobyrn, V. [PNPI Gatchina (Russian Federation); Dürr, M. [University Gießen (Germany); Eom, J. [Pusan National University (Korea, Republic of); Eschke, J. [GSI Darmstadt (Germany); Höhne, C. [University Gießen (Germany); Kampert, K.-H. [University Wuppertal (Germany); Kleipa, V. [GSI Darmstadt (Germany); Kochenda, L. [PNPI Gatchina (Russian Federation); Kolb, B. [GSI Darmstadt (Germany); Kopfer, J. [University Wuppertal (Germany); Kravtsov, P. [PNPI Gatchina (Russian Federation); Lebedev, S.; Lebedeva, E. [University Gießen (Germany); Leonova, E. [PNPI Gatchina (Russian Federation); and others

    2014-12-01

    The CBM experiment at the future FAIR facility will explore nuclear matter at high net-baryon densities. One of the key observables is di-leptons as they penetrate the created matter without further strong interactions. A gaseous RICH detector in a standard projective geometry using spherical mirrors is one of two detector elements for the required electron identification. The mirror system consists of about 72 trapezoidal mirror tiles. Any misalignment between the tiles relative to the nominal common spherical surface leads to reduction of the reconstruction efficiency of Cherenkov rings and deterioration of their resolution. To determine tolerances in mirror misalignment extensive simulation and measurement studies were carried out. Pure CO{sub 2} will be used as radiator gas. Gas contamination, mainly moisture and Oxygen, reduces the number of detected photons per ring and worsens the quality of reconstructed Cherenkov rings. Therefore a study was carried out to determine tolerances in radiator gas contamination. - Highlights: • Mirror misalignment leads to ring deformation in a RICH detector. • Radiator contamination leads to resolution deterioration of fitted rings. • To determine tolerances measurements and simulations were carried out. • Mirror displacements of up to 0.32 mm at any mirror side can be tolerated. • Oxygen (moisture) contamination of up to 1% (0.0011%) can be safely tolerated.

  6. Hybrid Electrostatic/Flextensional Mirror for Lightweight, Large-Aperture, and Cryogenic Space Telescopes

    Science.gov (United States)

    Patrick, Brian; Moore, James; Hackenberger, Wesley; Jiang, Xiaoning

    2013-01-01

    A lightweight, cryogenically capable, scalable, deformable mirror has been developed for space telescopes. This innovation makes use of polymer-based membrane mirror technology to enable large-aperture mirrors that can be easily launched and deployed. The key component of this innovation is a lightweight, large-stroke, cryogenic actuator array that combines the high degree of mirror figure control needed with a large actuator influence function. The latter aspect of the innovation allows membrane mirror figure correction with a relatively low actuator density, preserving the lightweight attributes of the system. The principal components of this technology are lightweight, low-profile, high-stroke, cryogenic-capable piezoelectric actuators based on PMN-PT (piezoelectric lead magnesium niobate-lead titanate) single-crystal configured in a flextensional actuator format; high-quality, low-thermal-expansion polymer membrane mirror materials developed by NeXolve; and electrostatic coupling between the membrane mirror and the piezoelectric actuator assembly to minimize problems such as actuator print-through.

  7. ATLAST ULE mirror segment performance analytical predictions based on thermally induced distortions

    Science.gov (United States)

    Eisenhower, Michael J.; Cohen, Lester M.; Feinberg, Lee D.; Matthews, Gary W.; Nissen, Joel A.; Park, Sang C.; Peabody, Hume L.

    2015-09-01

    The Advanced Technology Large-Aperture Space Telescope (ATLAST) is a concept for a 9.2 m aperture space-borne observatory operating across the UV/Optical/NIR spectra. The primary mirror for ATLAST is a segmented architecture with pico-meter class wavefront stability. Due to its extraordinarily low coefficient of thermal expansion, a leading candidate for the primary mirror substrate is Corning's ULE® titania-silicate glass. The ATLAST ULE® mirror substrates will be maintained at `room temperature' during on orbit flight operations minimizing the need for compensation of mirror deformation between the manufacturing temperature and the operational temperatures. This approach requires active thermal management to maintain operational temperature while on orbit. Furthermore, the active thermal control must be sufficiently stable to prevent time-varying thermally induced distortions in the mirror substrates. This paper describes a conceptual thermal management system for the ATLAST 9.2 m segmented mirror architecture that maintains the wavefront stability to less than 10 pico-meters/10 minutes RMS. Thermal and finite element models, analytical techniques, accuracies involved in solving the mirror figure errors, and early findings from the thermal and thermal-distortion analyses are presented.

  8. Mirror Advanced Reactor Study (MARS)

    International Nuclear Information System (INIS)

    Logan, B.G.

    1983-01-01

    Progress in a two year study of a 1200 MWe commercial tandem mirror reactor (MARS - Mirror Advanced Reactor Study) has reached the point where major reactor system technologies are identified. New design features of the magnets, blankets, plug heating systems and direct converter are described. With the innovation of radial drift pumping to maintain low plug density, reactor recirculating power fraction is reduced to 20%. Dominance of radial ion and impurity losses into the halo permits gridless, circular direct converters to be dramatically reduced in size. Comparisons of MARS with the Starfire tokamak design are made

  9. The Mirror in the Ground

    DEFF Research Database (Denmark)

    Shepherd, Nick

    An important and original contribution to the study of the archive, The Mirror in the Ground approaches the discipline of archaeology in South Africa from the perspective of an interest in visualities. Author Nick Shepherd argues that it makes sense to talk about an archaeological aesthetics...... at the University of Cape Town, where he convenes a graduate programme on Public Culture and Heritage. The Mirror in the Ground is the first volume in the relaunched Series in Visual Histories, produced by the Centre for Curating the Archive (CCA) at the University of Cape Town....

  10. Mirror Fusion Test Facility magnet

    International Nuclear Information System (INIS)

    Henning, C.H.; Hodges, A.J.; Van Sant, J.H.; Hinkle, R.E.; Horvath, J.A.; Hintz, R.E.; Dalder, E.; Baldi, R.; Tatro, R.

    1979-01-01

    The Mirror Fusion Test Facility (MFTF) is the largest of the mirror program experiments for magnetic fusion energy. It seeks to combine and extend the near-classical plasma confinement achieved in 2XIIB with the most advanced neutral-beam and magnet technologies. The product of ion density and confinement time will be improved more than an order of magnitude, while the superconducting magnet weight will be extrapolated from the 15 tons in Baseball II to 375 tons in MFTF. Recent reactor studies show that the MFTF will traverse much of the distance in magnet technology towards the reactor regime. Design specifics of the magnet are given

  11. A novel deformation mechanism for superplastic deformation

    Energy Technology Data Exchange (ETDEWEB)

    Muto, H.; Sakai, M. (Toyohashi Univ. of Technology (Japan). Dept. of Materials Science)

    1999-01-01

    Uniaxial compressive creep tests with strain value up to -0.1 for a [beta]-spodumene glass ceramic are conducted at 1060 C. From the observation of microstructural changes between before and after the creep deformations, it is shown that the grain-boundary sliding takes place via cooperative movement of groups of grains rather than individual grains under the large-scale-deformation. The deformation process and the surface technique used in this work are not only applicable to explain the deformation and flow of two-phase ceramics but also the superplastic deformation. (orig.) 12 refs.

  12. Timecourse of mirror and counter-mirror effects measured with transcranial magnetic stimulation.

    Science.gov (United States)

    Cavallo, Andrea; Heyes, Cecilia; Becchio, Cristina; Bird, Geoffrey; Catmur, Caroline

    2014-08-01

    The human mirror system has been the subject of much research over the past two decades, but little is known about the timecourse of mirror responses. In addition, it is unclear whether mirror and counter-mirror effects follow the same timecourse. We used single-pulse transcranial magnetic stimulation to investigate the timecourse of mirror and counter-mirror responses in the human brain. Experiment 1 demonstrated that mirror responses can be measured from around 200 ms after observed action onset. Experiment 2 demonstrated significant effects of counter-mirror sensorimotor training at all timepoints at which a mirror response was found in Experiment 1 (i.e. from 200 ms onward), indicating that mirror and counter-mirror responses follow the same timecourse. By suggesting similarly direct routes for mirror and counter-mirror responses, these results support the associative account of mirror neuron origins whereby mirror responses arise as a result of correlated sensorimotor experience during development. More generally, they contribute to theorizing regarding mirror neuron function by providing some constraints on how quickly mirror responses can influence social cognition. © The Author (2013). Published by Oxford University Press. For Permissions, please email: journals.permissions@oup.com.

  13. A rota como memória

    Directory of Open Access Journals (Sweden)

    Patrick Fraysse

    Full Text Available No contexto de estudo do patrimônio por um ponto de vista comunicacional, este artigo permitiu-nos visualisar um objeto de comunicação por excelência « a estrada » como portador de informação a decifrar e a interpretar um documento, mas também como um repositário da memória coletiva, quer dizer um monumento. Paralelamente, a patrimonialização dos monumentos, dos conjuntos arquiteturais e sobretudo dos itinerários que os religam, dito de outra maneira, da estrada, assim como a sua documentarização (relatos de viagens, guias, bancos de dados participam de uma nova institucionalização da memória integrante também das estradas míticas como o caminho de São Tiago na França ou a famosa estrada 66 nos Estados-Unidos.

  14. MEMS Integrated Submount Alignment for Optoelectronics

    Science.gov (United States)

    Shakespeare, W. Jeffrey; Pearson, Raymond A.; Grenestedt, Joachim L.; Hutapea, Parsaoran; Gupta, Vikas

    2005-02-01

    One of the most expensive and time-consuming production processes for single-mode fiber-optic components is the alignment of the photonic chip or waveguide to the fiber. The alignment equipment is capital intensive and usually requires trained technicians to achieve desired results. Current technology requires active alignment since tolerances are only ~0.2 μ m or less for a typical laser diode. This is accomplished using piezoelectric actuated stages and active optical feedback. Joining technologies such as soldering, epoxy bonding, or laser welding may contribute significant postbond shift, and final coupling efficiencies are often less than 80%. This paper presents a method of adaptive optical alignment to freeze in place directly on an optical submount using a microelectromechanical system (MEMS) shape memory alloy (SMA) actuation technology. Postbond shift is eliminated since the phase change is the alignment actuation. This technology is not limited to optical alignment but can be applied to a variety of MEMS actuations, including nano-actuation and nano-alignment for biomedical applications. Experimental proof-of-concept results are discussed, and a simple analytical model is proposed to predict the stress strain behavior of the optical submount. Optical coupling efficiencies and alignment times are compared with traditional processes. The feasibility of this technique in high-volume production is discussed.

  15. Frequency adjustable MEMS vibration energy harvester

    Science.gov (United States)

    Podder, P.; Constantinou, P.; Amann, A.; Roy, S.

    2016-10-01

    Ambient mechanical vibrations offer an attractive solution for powering the wireless sensor nodes of the emerging “Internet-of-Things”. However, the wide-ranging variability of the ambient vibration frequencies pose a significant challenge to the efficient transduction of vibration into usable electrical energy. This work reports the development of a MEMS electromagnetic vibration energy harvester where the resonance frequency of the oscillator can be adjusted or tuned to adapt to the ambient vibrational frequency. Micro-fabricated silicon spring and double layer planar micro-coils along with sintered NdFeB micro-magnets are used to construct the electromagnetic transduction mechanism. Furthermore, another NdFeB magnet is adjustably assembled to induce variable magnetic interaction with the transducing magnet, leading to significant change in the spring stiffness and resonance frequency. Finite element analysis and numerical simulations exhibit substantial frequency tuning range (25% of natural resonance frequency) by appropriate adjustment of the repulsive magnetic interaction between the tuning and transducing magnet pair. This demonstrated method of frequency adjustment or tuning have potential applications in other MEMS vibration energy harvesters and micromechanical oscillators.

  16. Piezoelectric Zinc Oxide Based MEMS Acoustic Sensor

    Directory of Open Access Journals (Sweden)

    Aarti Arora

    2008-04-01

    Full Text Available An acoustic sensors exhibiting good sensitivity was fabricated using MEMS technology having piezoelectric zinc oxide as a dielectric between two plates of capacitor. Thin film zinc oxide has structural, piezoelectric and optical properties for surface acoustic wave (SAW and bulk acoustic wave (BAW devices. Oxygen effficient films are transparent and insulating having wide applications for sensors and transducers. A rf sputtered piezoelectric ZnO layer transforms the mechanical deflection of a thin etched silicon diaphragm into a piezoelectric charge. For 25-micron thin diaphragm Si was etched in tetramethylammonium hydroxide solution using bulk micromachining. This was followed by deposition of sandwiched structure composed of bottom aluminum electrode, sputtered 3 micron ZnO film and top aluminum electrode. A glass having 1 mm diameter hole was bonded on backside of device to compensate sound pressure in side the cavity. The measured value of central capacitance and dissipation factor of the fabricated MEMS acoustic sensor was found to be 82.4pF and 0.115 respectively, where as the value of ~176 pF was obtained for the rim capacitance with a dissipation factor of 0.138. The response of the acoustic sensors was reproducible for the devices prepared under similar processing conditions under different batches. The acoustic sensor was found to be working from 30Hz to 8KHz with a sensitivity of 139µV/Pa under varying acoustic pressure.

  17. Characterisation and Modelling of MEMS Ultrasonic Transducers

    International Nuclear Information System (INIS)

    Teng, M F; Hariz, A J

    2006-01-01

    Silicon ultrasonic transducer micro arrays based on micro-electro-mechanicalsystem (MEMS) technologies are gaining popularity for applications in sonar sensing and excitation. A current challenge for many researchers is modelling the dynamic performance of these and other micro-mechanical devices to ascertain their performance and explain experimental observations reported. In this work, the performance simulation of a MEMS ultrasonic transducer array made from silicon nitride has been successfully carried out using CoventorWare package. The dynamic response of the entire transducer array was characterised, and the results were compared with theoretical predictions. Individual elements were found to vibrate with Bessel-like displacement patterns, and they were resonant at approximately 3 MHz, depending on thickness and lateral dimensions. The frequency shows a linear dependence around the common thickness of 2 μm. Peak displacement levels were examined as a function of frequency, DC bias voltage, and AC drive voltage. Accounting for fabrication variations, and uniformity variations across the wafer, the full array showed minimal variations in peak out-of-plane displacement levels across the device, and isolated elements that were over-responsive and under-responsive. Presently, the effect of observed variations across the array on the performance of the transducers and their radiated fields are being examined

  18. Frequency adjustable MEMS vibration energy harvester

    International Nuclear Information System (INIS)

    Podder, P; Constantinou, P; Roy, S; Amann, A

    2016-01-01

    Ambient mechanical vibrations offer an attractive solution for powering the wireless sensor nodes of the emerging “Internet-of-Things”. However, the wide-ranging variability of the ambient vibration frequencies pose a significant challenge to the efficient transduction of vibration into usable electrical energy. This work reports the development of a MEMS electromagnetic vibration energy harvester where the resonance frequency of the oscillator can be adjusted or tuned to adapt to the ambient vibrational frequency. Micro-fabricated silicon spring and double layer planar micro-coils along with sintered NdFeB micro-magnets are used to construct the electromagnetic transduction mechanism. Furthermore, another NdFeB magnet is adjustably assembled to induce variable magnetic interaction with the transducing magnet, leading to significant change in the spring stiffness and resonance frequency. Finite element analysis and numerical simulations exhibit substantial frequency tuning range (25% of natural resonance frequency) by appropriate adjustment of the repulsive magnetic interaction between the tuning and transducing magnet pair. This demonstrated method of frequency adjustment or tuning have potential applications in other MEMS vibration energy harvesters and micromechanical oscillators. (paper)

  19. MEMS mass-spring-damper systems using an out-of-plane suspension scheme

    KAUST Repository

    Abdel Aziz, Ahmed Kamal Said; Sharaf, Abdel Hameed; Serry, Mohamed Yousef; Sedky, Sherif Salah

    2014-01-01

    MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) using an out-of-plane (or vertical) suspension scheme, wherein the suspensions are normal to the proof mass, are disclosed. Such out-of-plane suspension scheme helps such MEMS mass-spring-damper systems achieve inertial grade performance. Methods of fabricating out-of-plane suspensions in MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) are also disclosed.

  20. MEMS mass-spring-damper systems using an out-of-plane suspension scheme

    KAUST Repository

    Abdel Aziz, Ahmed Kamal Said

    2014-02-04

    MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) using an out-of-plane (or vertical) suspension scheme, wherein the suspensions are normal to the proof mass, are disclosed. Such out-of-plane suspension scheme helps such MEMS mass-spring-damper systems achieve inertial grade performance. Methods of fabricating out-of-plane suspensions in MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) are also disclosed.

  1. Carbon microelectromechanical systems (C-MEMS) based microsupercapacitors

    KAUST Repository

    Agrawal, Richa

    2015-05-18

    The rapid development in miniaturized electronic devices has led to an ever increasing demand for high-performance rechargeable micropower scources. Microsupercapacitors in particular have gained much attention in recent years owing to their ability to provide high pulse power while maintaining long cycle lives. Carbon microelectromechanical systems (C-MEMS) is a powerful approach to fabricate high aspect ratio carbon microelectrode arrays, which has been proved to hold great promise as a platform for energy storage. C-MEMS is a versatile technique to create carbon structures by pyrolyzing a patterned photoresist. Furthermore, different active materials can be loaded onto these microelectrode platforms for further enhancement of the electrochemical performance of the C-MEMS platform. In this article, different techniques and methods in order to enhance C-MEMS based various electrochemical capacitor systems have been discussed, including electrochemical activation of C-MEMS structures for miniaturized supercapacitor applications, integration of carbon nanostructures like carbon nanotubes onto C-MEMS structures and also integration of pseudocapacitive materials such as polypyrrole onto C-MEMS structures. © (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.

  2. A MEMS-based, wireless, biometric-like security system

    Science.gov (United States)

    Cross, Joshua D.; Schneiter, John L.; Leiby, Grant A.; McCarter, Steven; Smith, Jeremiah; Budka, Thomas P.

    2010-04-01

    We present a system for secure identification applications that is based upon biometric-like MEMS chips. The MEMS chips have unique frequency signatures resulting from fabrication process variations. The MEMS chips possess something analogous to a "voiceprint". The chips are vacuum encapsulated, rugged, and suitable for low-cost, highvolume mass production. Furthermore, the fabrication process is fully integrated with standard CMOS fabrication methods. One is able to operate the MEMS-based identification system similarly to a conventional RFID system: the reader (essentially a custom network analyzer) detects the power reflected across a frequency spectrum from a MEMS chip in its vicinity. We demonstrate prototype "tags" - MEMS chips placed on a credit card-like substrate - to show how the system could be used in standard identification or authentication applications. We have integrated power scavenging to provide DC bias for the MEMS chips through the use of a 915 MHz source in the reader and a RF-DC conversion circuit on the tag. The system enables a high level of protection against typical RFID hacking attacks. There is no need for signal encryption, so back-end infrastructure is minimal. We believe this system would make a viable low-cost, high-security system for a variety of identification and authentication applications.

  3. Carbon microelectromechanical systems (C-MEMS) based microsupercapacitors

    KAUST Repository

    Agrawal, Richa; Beidaghi, Majid; Chen, Wei; Wang, Chunlei

    2015-01-01

    The rapid development in miniaturized electronic devices has led to an ever increasing demand for high-performance rechargeable micropower scources. Microsupercapacitors in particular have gained much attention in recent years owing to their ability to provide high pulse power while maintaining long cycle lives. Carbon microelectromechanical systems (C-MEMS) is a powerful approach to fabricate high aspect ratio carbon microelectrode arrays, which has been proved to hold great promise as a platform for energy storage. C-MEMS is a versatile technique to create carbon structures by pyrolyzing a patterned photoresist. Furthermore, different active materials can be loaded onto these microelectrode platforms for further enhancement of the electrochemical performance of the C-MEMS platform. In this article, different techniques and methods in order to enhance C-MEMS based various electrochemical capacitor systems have been discussed, including electrochemical activation of C-MEMS structures for miniaturized supercapacitor applications, integration of carbon nanostructures like carbon nanotubes onto C-MEMS structures and also integration of pseudocapacitive materials such as polypyrrole onto C-MEMS structures. © (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.

  4. Optimization and simulation of MEMS rectilinear ion trap

    Directory of Open Access Journals (Sweden)

    Huang Gang

    2015-04-01

    Full Text Available In this paper, the design of a MEMS rectilinear ion trap was optimized under simulated conditions. The size range of the MEMS rectilinear ion trap’s electrodes studied in this paper is measured at micron scale. SIMION software was used to simulate the MEMS rectilinear ion trap with different sizes and different radio-frequency signals. The ion-trapping efficiencies of the ion trap under these different simulation conditions were obtained. The ion-trapping efficiencies were compared to determine the performance of the MEMS rectilinear ion trap in different conditions and to find the optimum conditions. The simulation results show that for the ion trap at micron scale or smaller, the optimized length–width ratio was 0.8, and a higher frequency of radio-frequency signal is necessary to obtain a higher ion-trapping efficiency. These results have a guiding role in the process of developing MEMS rectilinear ion traps, and great application prospects in the research fields of the MEMS rectilinear ion trap and the MEMS mass spectrometer.

  5. Role of particle-hole symmetry in mirror energy difference

    International Nuclear Information System (INIS)

    Kumar, V.; Kumar, S.; Hasan, Z.; Kumar, D.; Koranga, B.S.; Rohitash; Singh, D.; Negi, D.; Angus, L.

    2011-01-01

    Charge symmetry between protons and neutrons means that they can be viewed as two states of the same particle, the nucleon, characterized by different projections of the isospin quantum number. In the hypothesis of charge symmetry expected identical behaviour of excited states of two nuclei with the same total number of nucleons (isobaric nuclei). The nuclei with magic number are considered to be spherical. When the number of particles/holes increase, the nucleus try towards more deformed upto mid-shell. It shows symmetry between particles and holes towards the deformation. The hypothesis of Particle-hole symmetry expected identical behaviour of excited states of two nuclei close to magic number. It is worthwhile to examine the shape of mirror energy difference (MED) close to magic number nuclei, which will also an example of particle-hole symmetry

  6. Intracardiac ultrasound scanner using a micromachine (MEMS) actuator.

    Science.gov (United States)

    Zara, J M; Bobbio, S M; Goodwin-Johansson, S; Smith, S W

    2000-01-01

    Catheter-based intracardiac ultrasound offers the potential for improved guidance of interventional cardiac procedures. The objective of this research is the development of catheter-based mechanical sector scanners incorporating high frequency ultrasound transducers operating at frequencies up to 20 MHz. The authors' current transducer assembly consists of a single 1.75 mm by 1.75 mm, 20 MHz, PZT element mounted on a 2 mm by 2 mm square, 75 mum thick polyimide table that pivots on 3-mum thick gold plated polyimide hinges. The hinges also serve as the electrical connections to the transducer. This table-mounted transducer is tilted using a miniature linear actuator to produce a sector scan. This linear actuator is an integrated force array (IFA), which is an example of a micromachine, i.e., a microelectromechanical system (MEMS). The IFA is a thin (2.2 mum) polyimide membrane, which consists of a network of hundreds of thousands of micron scale deformable capacitors made from pairs of metallized polyimide plates. IFAs contract with an applied voltage of 30-120 V and have been shown to produce strains as large as 20% and forces of up to 8 dynes. The prototype transducer and actuator assembly was fabricated and interfaced with a GagePCI analog to digital conversion board digitizing 12 bit samples at a rate of 100 MSamples/second housed in a personal computer to create a single channel ultrasound scanner. The deflection of the table transducer in a low viscosity insulating fluid (HFE 7100, 3M) is up to +/-10 degrees at scan rates of 10-60 Hz. Software has been developed to produce real-time sector scans on the PC monitor.

  7. Mirror model for sterile neutrinos

    International Nuclear Information System (INIS)

    Berezinsky, Veniamin; Narayan, Mohan; Vissani, Francesco

    2003-01-01

    Sterile neutrinos are studied as subdominant contribution to solar neutrino physics. The mirror-matter neutrinos are considered as sterile neutrinos. We use the symmetric mirror model with gravitational communication between mirror and visible sectors. This communication term provides mixing between visible and mirror neutrinos with the basic scale μ=v EW 2 /M Pl =2.5x10 -6 eV, where v EW =174 GeV is the vacuum expectation value of the standard electroweak group and M Pl is the Planckian mass. It is demonstrated that each mass eigenstate of active neutrinos splits into two states separated by small Δm 2 . Unsuppressed oscillations between active and sterile neutrinos (ν a ↔ν s ) occur only in transitions between each of these close pairs ('windows'). These oscillations are characterized by very small Δm 2 and can suppress the flux and distort spectrum of pp-neutrinos in detectable way. The other observable effect is anomalous seasonal variation of neutrino flux, which appears in LMA solution. The considered subdominant neutrino oscillations ν a ↔ν s can reveal itself as big effects in observations of supernova neutrinos and high-energy (HE) neutrinos. In the case of HE neutrinos they can provide a very large diffuse flux of active neutrinos unconstrained by the e-m cascade upper limit

  8. Mirror Confinement Systems: project summaries

    International Nuclear Information System (INIS)

    1980-07-01

    This report contains descriptions of the projects supported by the Mirror Confinement Systems (MCS) Division of the Office of Fusion Energy. The individual project summaries were prepared by the principal investigators, in collaboration with MCS staff office, and include objectives and milestones for each project. In addition to project summaries, statements of Division objectives and budget summaries are also provided

  9. MHD stability of tandem mirrors

    International Nuclear Information System (INIS)

    Poulsen, P.; Molvik, A.; Shearer, J.

    1982-01-01

    The TMX-Upgrade experiment was described, and the manner in which various plasma parameters could be affected was discussed. The initial analysis of the MHD stability of the tandem mirror was also discussed, with emphasis on the negative tandem configuration

  10. Status of tandem mirror theory

    International Nuclear Information System (INIS)

    Baldwin, D.E.

    1979-01-01

    This report contains the text and slides used for the review talk on tandem mirror theory presented at the meeting of the Division of Plasma Physics, A.P.S., Boston, MA, November 12-16, 1979. Topics covered include classical confinement, equilibria, MHD- and micro-stability, radial transport, and thermal barriers

  11. Mirror research: status and prospects

    International Nuclear Information System (INIS)

    Baldwin, D.E.

    1983-01-01

    The tandem mirror program has evolved considerably in the last decade. Of significance is the viable reactor concept embodied in the MARS design. An aggressive experimental program culminating in the operation of MFTF-B in late 1986, will provide a firm basis for refining the MARS design as necessary for constructing a reactor prototype in the 1990s

  12. Three mirror pairs of fermion families

    International Nuclear Information System (INIS)

    Montvay, I.

    1988-01-01

    A simple model with three mirror pairs of fermion families is considered which allows for a substantial mixing between the mirror fermion partners without conflicting with known phenomenology. (orig.)

  13. The Axisymmetric Tandem Mirror: A Magnetic Mirror Concept Game Changer Magnet Mirror Status Study Group

    International Nuclear Information System (INIS)

    Simonen, T.; Cohen, R.; Correll, D.; Fowler, K.; Post, D.; Berk, H.; Horton, W.; Hooper, E.B.; Fisch, N.; Hassam, A.; Baldwin, D.; Pearlstein, D.; Logan, G.; Turner, B.; Moir, R.; Molvik, A.; Ryutov, D.; Ivanov, A.A; Kesner, J.; Cohen, B.; McLean, H.; Tamano, T.; Tang, X.Z.; Imai, T.

    2008-01-01

    Experimental results, theory and innovative ideas now point with increased confidence to the possibility of a Gas Dynamic Trap (GDT) neutron source which would be on the path to an attractively simple Axisymmetric Tandem Mirror (ATM) power plant. Although magnetic mirror research was terminated in the US 20 years ago, experiments continued in Japan (Gamma 10) and Russia (GDT), with a very small US effort. This research has now yielded data, increased understanding, and generated ideas resulting in the new concepts described here. Early mirror research was carried out with circular axisymmetric magnets. These plasmas were MHD unstable due to the unfavorable magnetic curvature near the mid-plane. Then the minimum-B concept emerged in which the field line curvature was everywhere favorable and the plasma was situated in a MHD stable magnetic well (70% average beta in 2XII-B). The Ioffe-bar or baseball-coil became the standard for over 40 years. In the 1980's, driven by success with minimum-B stabilization and the control of ion cyclotron instabilities in PR6 and 2XII-B, mirrors were viewed as a potentially attractive concept with near-term advantages as a lower Q neutron source for applications such as a hybrid fission fuel factory or toxic waste burner. However there are down sides to the minimum-B geometry: coil construction is complex; restraining magnetic forces limit field strength and mirror ratios. Furthermore, the magnetic field lines have geodesic curvature which introduces resonant and neoclassical radial transport as observed in early tandem mirror experiments. So what now leads us to think that simple axisymmetric mirror plasmas can be stable? The Russian GDT experiment achieves on-axis 60% beta by peaking of the kinetic plasma pressure near the mirror throat (where the curvature is favorable) to counter-balance the average unfavorable mid-plane curvature. Then a modest augmentation of plasma pressure in the expander results in stability. The GDT

  14. The Axisymmetric Tandem Mirror: A Magnetic Mirror Concept Game Changer Magnet Mirror Status Study Group

    Energy Technology Data Exchange (ETDEWEB)

    Simonen, T; Cohen, R; Correll, D; Fowler, K; Post, D; Berk, H; Horton, W; Hooper, E B; Fisch, N; Hassam, A; Baldwin, D; Pearlstein, D; Logan, G; Turner, B; Moir, R; Molvik, A; Ryutov, D; Ivanov, A A; Kesner, J; Cohen, B; McLean, H; Tamano, T; Tang, X Z; Imai, T

    2008-10-24

    Experimental results, theory and innovative ideas now point with increased confidence to the possibility of a Gas Dynamic Trap (GDT) neutron source which would be on the path to an attractively simple Axisymmetric Tandem Mirror (ATM) power plant. Although magnetic mirror research was terminated in the US 20 years ago, experiments continued in Japan (Gamma 10) and Russia (GDT), with a very small US effort. This research has now yielded data, increased understanding, and generated ideas resulting in the new concepts described here. Early mirror research was carried out with circular axisymmetric magnets. These plasmas were MHD unstable due to the unfavorable magnetic curvature near the mid-plane. Then the minimum-B concept emerged in which the field line curvature was everywhere favorable and the plasma was situated in a MHD stable magnetic well (70% average beta in 2XII-B). The Ioffe-bar or baseball-coil became the standard for over 40 years. In the 1980's, driven by success with minimum-B stabilization and the control of ion cyclotron instabilities in PR6 and 2XII-B, mirrors were viewed as a potentially attractive concept with near-term advantages as a lower Q neutron source for applications such as a hybrid fission fuel factory or toxic waste burner. However there are down sides to the minimum-B geometry: coil construction is complex; restraining magnetic forces limit field strength and mirror ratios. Furthermore, the magnetic field lines have geodesic curvature which introduces resonant and neoclassical radial transport as observed in early tandem mirror experiments. So what now leads us to think that simple axisymmetric mirror plasmas can be stable? The Russian GDT experiment achieves on-axis 60% beta by peaking of the kinetic plasma pressure near the mirror throat (where the curvature is favorable) to counter-balance the average unfavorable mid-plane curvature. Then a modest augmentation of plasma pressure in the expander results in stability. The GDT

  15. Mounting and Alignment of IXO Mirror Segments

    Science.gov (United States)

    Chan, Kai-Wing; Zhang, William; Evans, Tyler; McClelland, Ryan; Hong, Melinda; Mazzarella, James; Saha, Timo; Jalota, Lalit; Olsen, Lawrence; Byron, Glenn

    2010-01-01

    A suspension-mounting scheme is developed for the IXO (International X-ray Observatory) mirror segments in which the figure of the mirror segment is preserved in each stage of mounting. The mirror, first fixed on a thermally compatible strongback, is subsequently transported, aligned and transferred onto its mirror housing. In this paper, we shall outline the requirement, approaches, and recent progress of the suspension mount processes.

  16. Plasma impact on diagnostic mirrors in JET

    OpenAIRE

    A. Garcia-Carrasco; P. Petersson; M. Rubel; A. Widdowson; E. Fortuna-Zalesna; S. Jachmich; M. Brix; L. Marot

    2017-01-01

    Metallic mirrors will be essential components of all optical systems for plasma diagnosis in ITER. This contribution provides a comprehensive account on plasma impact on diagnostic mirrors in JET with the ITER-Like Wall. Specimens from the First Mirror Test and the lithium-beam diagnostic have been studied by spectrophotometry, ion beam analysis and electron microscopy. Test mirrors made of molybdenum were retrieved from the main chamber and the divertor after exposure to the 2013–2014 experi...

  17. A method for manufacturing a hollow mems structure

    DEFF Research Database (Denmark)

    2017-01-01

    The present invention relates to a method for manufacturing an at least partly hollow MEMS structure. In a first step one or more through-going openings is/are provided in core material. The one or more through-going openings is/are then covered by an etch-stop layer. After this step, a bottom...... further comprises the step of creating bottom and top conductors in the respective bottom and top layers. Finally, excess core material is removed in order to create the at least partly hollow MEMS structure which may include a MEMS inductor....

  18. Differential RF MEMS interwoven capacitor immune to residual stress warping

    KAUST Repository

    Elshurafa, Amro M.; Salama, Khaled N.

    2012-01-01

    A RF MEMS capacitor with an interwoven structure is designed, fabricated in the PolyMUMPS process and tested in an effort to address fabrication challenges usually faced in MEMS processes. The interwoven structure was found to offer several advantages over the typical MEMS parallel-plate design including eliminating the warping caused by residual stress, eliminating the need for etching holes, suppressing stiction, reducing parasitics and providing differential capability. The quality factor of the proposed capacitor was higher than five throughout a 2–10 GHz range and the resonant frequency was in excess of 20 GHz.

  19. The Sandia MEMS passive shock sensor : FY07 maturation activities.

    Energy Technology Data Exchange (ETDEWEB)

    Houston, Jack E.; Blecke, Jill; Mitchell, John Anthony; Wittwer, Jonathan W.; Crowson, Douglas A.; Clemens, Rebecca C.; Walraven, Jeremy Allen; Epp, David S.; Baker, Michael Sean

    2008-08-01

    This report describes activities conducted in FY07 to mature the MEMS passive shock sensor. The first chapter of the report provides motivation and background on activities that are described in detail in later chapters. The second chapter discusses concepts that are important for integrating the MEMS passive shock sensor into a system. Following these two introductory chapters, the report details modeling and design efforts, packaging, failure analysis and testing and validation. At the end of FY07, the MEMS passive shock sensor was at TRL 4.

  20. Differential RF MEMS interwoven capacitor immune to residual stress warping

    KAUST Repository

    Elshurafa, Amro M.

    2012-07-27

    A RF MEMS capacitor with an interwoven structure is designed, fabricated in the PolyMUMPS process and tested in an effort to address fabrication challenges usually faced in MEMS processes. The interwoven structure was found to offer several advantages over the typical MEMS parallel-plate design including eliminating the warping caused by residual stress, eliminating the need for etching holes, suppressing stiction, reducing parasitics and providing differential capability. The quality factor of the proposed capacitor was higher than five throughout a 2–10 GHz range and the resonant frequency was in excess of 20 GHz.

  1. High Volume Manufacturing and Field Stability of MEMS Products

    Science.gov (United States)

    Martin, Jack

    Low volume MEMS/NEMS production is practical when an attractive concept is implemented with business, manufacturing, packaging, and test support. Moving beyond this to high volume production adds requirements on design, process control, quality, product stability, market size, market maturity, capital investment, and business systems. In a broad sense, this chapter uses a case study approach: It describes and compares the silicon-based MEMS accelerometers, pressure sensors, image projection systems, and gyroscopes that are in high volume production. Although they serve several markets, these businesses have common characteristics. For example, the manufacturing lines use automated semiconductor equipment and standard material sets to make consistent products in large quantities. Standard, well controlled processes are sometimes modified for a MEMS product. However, novel processes that cannot run with standard equipment and material sets are avoided when possible. This reliance on semiconductor tools, as well as the organizational practices required to manufacture clean, particle-free products partially explains why the MEMS market leaders are integrated circuit manufacturers. There are other factors. MEMS and NEMS are enabling technologies, so it can take several years for high volume applications to develop. Indeed, market size is usually a strong function of price. This becomes a vicious circle, because low price requires low cost - a result that is normally achieved only after a product is in high volume production. During the early years, IC companies reduced cost and financial risk by using existing facilities for low volume MEMS production. As a result, product architectures are partially determined by capabilities developed for previous products. This chapter includes a discussion of MEMS product architecture with particular attention to the impact of electronic integration, packaging, and surfaces. Packaging and testing are critical, because they are

  2. Mathematical analysis of partial differential equations modeling electrostatic MEMS

    CERN Document Server

    Esposito, Pierpaolo; Guo, Yujin

    2010-01-01

    Micro- and nanoelectromechanical systems (MEMS and NEMS), which combine electronics with miniature-size mechanical devices, are essential components of modern technology. It is the mathematical model describing "electrostatically actuated" MEMS that is addressed in this monograph. Even the simplified models that the authors deal with still lead to very interesting second- and fourth-order nonlinear elliptic equations (in the stationary case) and to nonlinear parabolic equations (in the dynamic case). While nonlinear eigenvalue problems-where the stationary MEMS models fit-are a well-developed

  3. The application of structural nonlinearity in the development of linearly tunable MEMS capacitors

    International Nuclear Information System (INIS)

    Shavezipur, M; Khajepour, A; Hashemi, S M

    2008-01-01

    Electrostatically actuated parallel-plate tunable capacitors are the most desired MEMS capacitors because of their smaller sizes and higher Q-factors. However, these capacitors suffer from low tunability and exhibit high sensitivity near the pull-in voltage which counters the concept of tunability. In this paper, a novel design for parallel-plate tunable capacitors with high tunability and linear capacitance–voltage (C–V) response is developed. The design uses nonlinear structural rigidities to relieve intrinsic electrostatic nonlinearity in MEMS capacitors. Based on the force–displacement characteristic of an ideally linear capacitor, a real beam-like nonlinear spring model is developed. The variable stiffness coefficients of such springs improve the linearity of the C–V curve. Moreover, because the structural stiffness increases with deformations, the pull-in is delayed and higher tunability is achieved. Finite element simulations reveal that capacitors with air gaps larger than 4 µm and supporting beams thinner than 1 µm can generate highly linear C–V responses and tunabilities over 120%. Experimental results for capacitors fabricated by PolyMUMPs verify the effect of weak nonlinear geometric stiffness on improving the tunability for designs with a small air gap and relatively thick structural layers

  4. Design and fabrication of a MEMS chevron-type thermal actuator

    Energy Technology Data Exchange (ETDEWEB)

    Baracu, Angela, E-mail: angela.baracu@imt.ro [Laboratory of Modeling, Simulation and CAD, National Institute for R and D in Microtechnologies - IMT Bucharest, 126A, Erou Iancu Nicolae Street, 077190, Bucharest, Romania and University Politehnica of Bucharest (Romania); Voicu, Rodica; Müller, Raluca; Avram, Andrei [Laboratory of Modeling, Simulation and CAD, National Institute for R and D in Microtechnologies - IMT Bucharest, 126A, Erou Iancu Nicolae Street, 077190, Bucharest (Romania); Pustan, Marius, E-mail: marius.pustan@omt.utcluj.ro; Chiorean, Radu, E-mail: marius.pustan@omt.utcluj.ro; Birleanu, Corina, E-mail: marius.pustan@omt.utcluj.ro; Dudescu, Cristian, E-mail: marius.pustan@omt.utcluj.ro [Laboratory of Micro and Nano Systems, Technical University of Cluj-Napoca, Bd. Muncii, no. 103-105, 400641 Cluj-Napoca (Romania)

    2015-02-17

    This paper presents the design and fabrication of a MEMS chevron-type thermal actuator. The device was designed for fabrication in the standard MEMS technology, where the topography of the upper layers depends on the patterns of structural and sacrificial layers underneath. The proposed actuator presents some advantages over usual thermal vertical chevron actuators by means of low operating voltages, high output force and linear movement without deformation of the shaft. The device simulations were done using COVENTOR software. The movement obtained by simulation was 12 μm, for a voltage of 0.2 V and the current intensity of 257 mA. The design optimizes the in-plane displacement by fixed anchors and beam inclination angle. Heating is provided by Joule dissipation. The material used for manufacture of chevron-based actuator was aluminum due to its thermal and mechanical properties. The release of the movable part was performed using isotropic dry etching by Reactive Ion Etching (RIE). A first inspection was achieved using Scanning Electron Microscope (SEM). In order to obtain the in-plane displacement we carried out electrical measurements. The thermal actuator can be used for a variety of optical and microassembling applications. This kind of thermal actuator could be integrated easily with other micro devices since its fabrication is compatible with the general semiconductor processes.

  5. X-ray imaging with toroidal mirror

    International Nuclear Information System (INIS)

    Aoki, Sadao; Sakayanagi, Yoshimi

    1978-01-01

    X-ray imaging is made with a single toroidal mirror or two successive toroidal mirrors. Geometrical images at the Gaussian image plane are described by the ray trace. Application of a single toroidal mirror to small-angle scattering is presented. (author)

  6. Connection between adiabaticity and the mirror mode

    International Nuclear Information System (INIS)

    Cohen, R.H.

    1976-01-01

    The size of magnetic moment jumps of a particle in a long, thin equilibrium magnetic mirror field is shown to be related to the complex zeroes of the mirror mode parameter B + 4πdP/sub perpendicular//dB. A consequence is that adiabaticity places a lower limit on β than does the mirror mode

  7. A generalized construction of mirror manifolds

    International Nuclear Information System (INIS)

    Berglund, P.; Huebsch, T.

    1993-01-01

    We generalize the known method for explicit construction of mirror pairs of (2,2)-superconformal field theories, using the formalism of Landau-Ginzburg orbifolds. Geometrically, these theories are realized as Calabi-Yau hypersurfaces in weighted projective spaces. This generalization makes it possible to construct the mirror partners of many manifolds for which the mirror was not previously known. (orig.)

  8. The mirror neuron system : New frontiers

    NARCIS (Netherlands)

    Keysers, Christian; Fadiga, Luciano

    2008-01-01

    Since the discovery of mirror neurons, much effort has been invested into Studying their location and properties in the human brain. Here we review these original findings and introduce the Main topics of this special issue of Social Neuroscience. What does the mirror system code? How is the mirror

  9. Tandem mirror next step conceptual design

    International Nuclear Information System (INIS)

    Doggett, J.N.; Damm, C.C.; Bulmer, R.H.

    1980-01-01

    A study was made to define the features of the experimental mirror fusion device - The Tandem Mirror Next Step, or TMNS - that will bridge the gap between present mirror confinement experiments and a power-producing reactor. We outline the project goals, describe some initial device parameters, and relate the technological requirements to ongoing development programs

  10. EUV multilayer mirror, optical system including a multilayer mirror and method of manufacturing a multilayer mirror

    NARCIS (Netherlands)

    Huang, Qiushi; Louis, Eric; Bijkerk, Frederik; de Boer, Meint J.; von Blanckenhagen, G.

    2016-01-01

    A multilayer mirror (M) reflecting extreme ultraviolet (EUV) radiation from a first wave-length range in a EUV spectral region comprises a substrate (SUB) and a stack of layers (SL) on the substrate, the stack of layers comprising layers comprising a low index material and a high index material, the

  11. Physics issues in mirror and tandem mirror systems

    International Nuclear Information System (INIS)

    Post, R.F.

    1984-01-01

    Over the years the study of the confinement of high temperature plasma in magnetic mirror systems has presented researchers with many unusual physics problems. Many of these issues are by now understood theoretically and documented experimentally. With the advent of the tandem mirror idea, some new issues have emerged and are now under intensive study. These include: (1) the generation and control of ambipolar confining potentials and their effect on axial confinement and, (2) the combined influence of nonaxisymmetric magnetic fields (used to ensure MHD stability) and electric magnetic particle drifts on radial transport. Physics considerations associated with these two categories of issues will be reviewed, including concepts for the control of radial transport, under study or proposed

  12. Superhydrophobic Surface Coatings for Microfluidics and MEMs.

    Energy Technology Data Exchange (ETDEWEB)

    Branson, Eric D.; Singh, Seema [Sandia National Laboratories, Livermore, CA; Houston, Jack E.; van Swol, Frank B.; Brinker, C. Jeffrey

    2006-11-01

    Low solid interfacial energy and fractally rough surface topography confer to Lotus plants superhydrophobic (SH) properties like high contact angles, rolling and bouncing of liquid droplets, and self-cleaning of particle contaminants. This project exploits the porous fractal structure of a novel, synthetic SH surface for aerosol collection, its self-cleaning properties for particle concentration, and its slippery nature 3 to enhance the performance of fluidic and MEMS devices. We propose to understand fundamentally the conditions needed to cause liquid droplets to roll rather than flow/slide on a surface and how this %22rolling transition%22 influences the boundary condition describing fluid flow in a pipe or micro-channel. Rolling of droplets is important for aerosol collection strategies because it allows trapped particles to be concentrated and transported in liquid droplets with no need for a pre-defined/micromachined fluidic architecture. The fluid/solid boundary condition is important because it governs flow resistance and rheology and establishes the fluid velocity profile. Although many research groups are exploring SH surfaces, our team is the first to unambiguously determine their effects on fluid flow and rheology. SH surfaces could impact all future SNL designs of collectors, fluidic devices, MEMS, and NEMS. Interfaced with inertial focusing aerosol collectors, SH surfaces would allow size-specific particle populations to be collected, concentrated, and transported to a fluidic interface without loss. In microfluidic systems, we expect to reduce the energy/power required to pump fluids and actuate MEMS. Plug-like (rather than parabolic) velocity profiles can greatly improve resolution of chip-based separations and enable unprecedented control of concentration profiles and residence times in fluidic-based micro-reactors. Patterned SH/hydrophilic channels could induce mixing in microchannels and enable development of microflow control elements

  13. Design rules for a compact and low-cost optical position sensing of MOEMS tilt mirrors based on a Gaussian-shaped light source

    Science.gov (United States)

    Baumgart, Marcus; Tortschanoff, Andreas

    2013-05-01

    A tilt mirror's deflection angle tracking setup is examined from a theoretical point of view. The proposed setup is based on a simple optical approach and easily scalable. Thus, the principle is especially of interest for small and fast oscillating MEMS/MOEMS based tilt mirrors. An experimentally established optical scheme is used as a starting point for accurate and fast mirror angle-position detection. This approach uses an additional layer, positioned under the MOEMS mirror's backside, consisting of a light source in the center and two photodetectors positioned symmetrical around the center. The mirror's back surface is illuminated by the light source and the intensity change due to mirror tilting is tracked via the photodiodes. The challenge of this method is to get a linear relation between the measured intensity and the current mirror tilt angle even for larger angles. State-of-the-art MOEMS mirrors achieve angles up to ±30°, which exceeds the linear angle approximations. The use of an LED, small laser diode or VCSEL as a lightsource is appropriate due to their small size and inexpensive price. Those light sources typically emit light with a Gaussian intensity distribution. This makes an analytical prediction of the expected detector signal quite complicated. In this publication an analytical simulation model is developed to evaluate the influence of the main parameters for this optical mirror tilt-sensor design. An easy and fast to calculate value directly linked to the mirror's tilt-angle is the "relative differential intensity" (RDI = (I1 - I2) / (I1 + I2)). Evaluation of its slope and nonlinear error highlights dependencies between the identified parameters for best SNR and linearity. Also the energy amount covering the detector area is taken into account. Design optimizing rules are proposed and discussed based on theoretical considerations.

  14. Determining the thermal expansion coefficient of thin films for a CMOS MEMS process using test cantilevers

    International Nuclear Information System (INIS)

    Cheng, Chao-Lin; Fang, Weileun; Tsai, Ming-Han

    2015-01-01

    Many standard CMOS processes, provided by existing foundries, are available. These standard CMOS processes, with stacking of various metal and dielectric layers, have been extensively applied in integrated circuits as well as micro-electromechanical systems (MEMS). It is of importance to determine the material properties of the metal and dielectric films to predict the performance and reliability of micro devices. This study employs an existing approach to determine the coefficients of thermal expansion (CTEs) of metal and dielectric films for standard CMOS processes. Test cantilevers with different stacking of metal and dielectric layers for standard CMOS processes have been designed and implemented. The CTEs of standard CMOS films can be determined from measurements of the out-of-plane thermal deformations of the test cantilevers. To demonstrate the feasibility of the present approach, thin films prepared by the Taiwan Semiconductor Manufacture Company 0.35 μm 2P4M CMOS process are characterized. Eight test cantilevers with different stacking of CMOS layers and an auxiliary Si cantilever on a SOI wafer are fabricated. The equivalent elastic moduli and CTEs of the CMOS thin films including the metal and dielectric layers are determined, respectively, from the resonant frequency and static thermal deformation of the test cantilevers. Moreover, thermal deformations of cantilevers with stacked layers different to those of the test beams have been employed to verify the measured CTEs and elastic moduli. (paper)

  15. The Hodge structure of semiample hypersurfaces and a generalization of the monomial-divisor mirror map

    OpenAIRE

    Mavlyutov, Anvar R.

    2000-01-01

    We solved the long-standing problem of describing the cohomology ring of semiample hypersurfaces in complete simplicial toric varieties. Also, the monomial-divisor mirror map is generalized to a map between the whole Picard group and the space of infinitesimal deformations for a mirror pair of Calabi-Yau hypersurfaces. This map is compatible with certain vanishing limiting products of the subrings of the chiral rings, on which the ring structure is related to a product of the roots of $A$-typ...

  16. Strong Motion Seismograph Based On MEMS Accelerometer

    Science.gov (United States)

    Teng, Y.; Hu, X.

    2013-12-01

    The MEMS strong motion seismograph we developed used the modularization method to design its software and hardware.It can fit various needs in different application situation.The hardware of the instrument is composed of a MEMS accelerometer,a control processor system,a data-storage system,a wired real-time data transmission system by IP network,a wireless data transmission module by 3G broadband,a GPS calibration module and power supply system with a large-volumn lithium battery in it. Among it,the seismograph's sensor adopted a three-axis with 14-bit high resolution and digital output MEMS accelerometer.Its noise level just reach about 99μg/√Hz and ×2g to ×8g dynamically selectable full-scale.Its output data rates from 1.56Hz to 800Hz. Its maximum current consumption is merely 165μA,and the device is so small that it is available in a 3mm×3mm×1mm QFN package. Furthermore,there is access to both low pass filtered data as well as high pass filtered data,which minimizes the data analysis required for earthquake signal detection. So,the data post-processing can be simplified. Controlling process system adopts a 32-bit low power consumption embedded ARM9 processor-S3C2440 and is based on the Linux operation system.The processor's operating clock at 400MHz.The controlling system's main memory is a 64MB SDRAM with a 256MB flash-memory.Besides,an external high-capacity SD card data memory can be easily added.So the system can meet the requirements for data acquisition,data processing,data transmission,data storage,and so on. Both wired and wireless network can satisfy remote real-time monitoring, data transmission,system maintenance,status monitoring or updating software.Linux was embedded and multi-layer designed conception was used.The code, including sensor hardware driver,the data acquisition,earthquake setting out and so on,was written on medium layer.The hardware driver consist of IIC-Bus interface driver, IO driver and asynchronous notification driver. The

  17. Feedback Control of MEMS to Atoms

    CERN Document Server

    Shapiro, Benjamin

    2012-01-01

    Feedback Control of MEMS to Atoms illustrates the use of control and control systems as an essential part of functioning integrated miniaturized systems. The book is organized according to the dimensional scale of the problem, starting with microscale systems and ending with atomic-scale systems. Similar to macroscale machines and processes, control systems can play a major role in improving the performance of micro- and nanoscale systems and in enabling new capabilities that would otherwise not be possible. The majority of problems at these scales present many new challenges that go beyond the current state-of-the-art in control theory and engineering. This is a result of the multidisciplinary nature of micro/nanotechnology, which requires the merging of control engineering with physics, biology and chemistry. This book: Shows how the utilization of feedback control in nanotechnology instrumentation can yield results far better than passive systems can Discusses the application of control systems to problems...

  18. A MEMS turbine prototype for respiration harvesting

    Science.gov (United States)

    Goreke, U.; Habibiabad, S.; Azgin, K.; Beyaz, M. I.

    2015-12-01

    The design, manufacturing, and performance characterization of a MEMS-scale turbine prototype is reported. The turbine is designed for integration into a respiration harvester that can convert normal human breathing into electrical power through electromagnetic induction. The device measures 10 mm in radius, and employs 12 blades located around the turbine periphery along with ball bearings around the center. Finite element simulations showed that an average torque of 3.07 μNm is induced at 12 lpm airflow rate, which lies in normal breathing levels. The turbine and a test package were manufactured using CNC milling on PMMA. Tests were performed at respiration flow rates between 5-25 lpm. The highest rotational speed was measured to be 9.84 krpm at 25 lpm, resulting in 8.96 mbar pressure drop across the device and 370 mW actuation power.

  19. Torsion based universal MEMS logic device

    KAUST Repository

    Ilyas, Saad; Carreno, Armando Arpys Arevalo; Bayes, Ernesto; Foulds, Ian G.; Younis, Mohammad I.

    2015-01-01

    In this work we demonstrate torsion based complementary MEMS logic device, which is capable, of performing INVERTER, AND, NAND, NOR, and OR gates using one physical structure within an operating range of 0-10 volts. It can also perform XOR and XNOR with one access inverter using the same structure with different electrical interconnects. The paper presents modeling, fabrication and experimental calculations of various performance features of the device including lifetime, power consumption and resonance frequency. The fabricated device is 535 μm by 150 μm with a gap of 1.92 μm and a resonant frequency of 6.51 kHz. The device is capable of performing the switching operation with a frequency of 1 kHz.

  20. Highly Tunable Narrow Bandpass MEMS Filter

    KAUST Repository

    Hafiz, Md Abdullah Al

    2017-07-07

    We demonstrate a proof-of-concept highly tunable narrow bandpass filter based on electrothermally and electrostatically actuated microelectromechanical-system (MEMS) resonators. The device consists of two mechanically uncoupled clamped-clamped arch resonators, designed such that their resonance frequencies are independently tuned to obtain the desired narrow passband. Through the electrothermal and electrostatic actuation, the stiffness of the structures is highly tunable. We experimentally demonstrate significant percentage tuning (~125%) of the filter center frequency by varying the applied electrothermal voltages to the resonating structures, while maintaining a narrow passband of 550 ± 50 Hz, a stopband rejection of >17 dB, and a passband ripple ≤ 2.5 dB. An analytical model based on the Euler-Bernoulli beam theory is used to confirm the behavior of the filter, and the origin of the high tunability using electrothermal actuation is discussed.

  1. Integrated electronics and fluidic MEMS for bioengineering

    Science.gov (United States)

    Fok, Ho Him Raymond

    Microelectromechanical systems (MEMS) and microelectronics have become enabling technologies for many research areas. This dissertation presents the use of fluidic MEMS and microelectronics for bioengineering applications. In particular, the versatility of MEMS and microelectronics is highlighted by the presentation of two different applications, one for in-vitro study of nano-scale dynamics during cell division and one for in-vivo monitoring of biological activities at the cellular level. The first application of an integrated system discussed in this dissertation is to utilize fluidic MEMS for studying dynamics in the mitotic spindle, which could lead to better chemotherapeutic treatments for cancer patients. Previous work has developed the use of electrokinetic phenomena on the surface of a glass-based platform to assemble microtubules, the building blocks of mitotic spindles. Nevertheless, there are two important limitations of this type of platform. First, an unconventional microfabrication process is necessary for the glass-based platform, which limits the utility of this platform. In order to overcome this limitation, in this dissertation a convenient microfluidic system is fabricated using a negative photoresist called SU-8. The fabrication process for the SU-8-based system is compatible with other fabrication techniques used in developing microelectronics, and this compatibility is essential for integrating electronics for studying dynamics in the mitotic spindle. The second limitation of the previously-developed glass-based platform is its lack of bio-compatibility. For example, microtubules strongly interact with the surface of the glass-based platform, thereby hindering the study of dynamics in the mitotic spindle. This dissertation presents a novel approach for assembling microtubules away from the surface of the platform, and a fabrication process is developed to assemble microtubules between two self-aligned thin film electrodes on thick SU-8

  2. Torsion based universal MEMS logic device

    KAUST Repository

    Ilyas, Saad

    2015-10-28

    In this work we demonstrate torsion based complementary MEMS logic device, which is capable, of performing INVERTER, AND, NAND, NOR, and OR gates using one physical structure within an operating range of 0-10 volts. It can also perform XOR and XNOR with one access inverter using the same structure with different electrical interconnects. The paper presents modeling, fabrication and experimental calculations of various performance features of the device including lifetime, power consumption and resonance frequency. The fabricated device is 535 μm by 150 μm with a gap of 1.92 μm and a resonant frequency of 6.51 kHz. The device is capable of performing the switching operation with a frequency of 1 kHz.

  3. Wideband MEMS Resonator Using Multifrequency Excitation

    KAUST Repository

    Jaber, Nizar; Ramini, Abdallah; Al Hennawi, Qais M.; Younis, Mohammad I.

    2016-01-01

    We demonstrate the excitation of combination resonances of additive and subtractive types and their exploitations to realize a large bandwidth micro-machined resonator of large amplitude even at higher harmonic modes of vibrations. The investigation is conducted on a Microelectromechanical systems (MEMS) clamped-clamped microbeam fabricated using polyimide as a structural layer coated with nickel from top and chromium and gold layers from bottom. The microbeam is excited by a two-source harmonic excitation, where the first frequency source is swept around the targeted resonance (first or third mode of vibration) while the second source frequency is kept fixed. We report for the first time a large bandwidth and large amplitude response near the higher order modes of vibration. Also, we show that by properly tuning the frequency and amplitude of the excitation force, the frequency bandwidth of the resonator is controlled.

  4. Wideband MEMS Resonator Using Multifrequency Excitation

    KAUST Repository

    Jaber, Nizar

    2016-03-09

    We demonstrate the excitation of combination resonances of additive and subtractive types and their exploitations to realize a large bandwidth micro-machined resonator of large amplitude even at higher harmonic modes of vibrations. The investigation is conducted on a Microelectromechanical systems (MEMS) clamped-clamped microbeam fabricated using polyimide as a structural layer coated with nickel from top and chromium and gold layers from bottom. The microbeam is excited by a two-source harmonic excitation, where the first frequency source is swept around the targeted resonance (first or third mode of vibration) while the second source frequency is kept fixed. We report for the first time a large bandwidth and large amplitude response near the higher order modes of vibration. Also, we show that by properly tuning the frequency and amplitude of the excitation force, the frequency bandwidth of the resonator is controlled.

  5. Planetary-Whigs: Optical MEMS-Based Seismometer, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — During this Phase I, Michigan Aerospace Corporation will adapt the design of an optical MEMS seismometer for lunar and other planetary science instrumentation. The...

  6. Investigation of a delayed feedback controller of MEMS resonators

    KAUST Repository

    Masri, Karim M.; Younis, Mohammad I.; Shao, Shuai

    2013-01-01

    Controlling mechanical systems is an important branch of mechanical engineering. Several techniques have been used to control Microelectromechanical systems (MEMS) resonators. In this paper, we study the effect of a delayed feedback controller

  7. CONTROL OF BOUNCING IN RF MEMS SWITCHES USING DOUBLE ELECTRODE

    KAUST Repository

    Abdul Rahim, Farhan

    2014-01-01

    MEMS based mechanical switches are seen to be the likely replacements for CMOS based switches due to the several advantages that these mechanical switches have over CMOS switches. Mechanical switches can be used in systems under extreme conditions

  8. A MEMS coupled resonator for frequency filtering in air

    KAUST Repository

    Ilyas, Saad; Jaber, Nizar; Younis, Mohammad I.

    2018-01-01

    We present design, fabrication, and characterization of a mechanically coupled MEMS H resonator capable of performing simultaneous mechanical amplification and filtering in air. The device comprises of two doubly clamped polyimide microbeams joined

  9. Initially Imperfect MEMS Microplates Under Electrostatic Actuation: Theory and Experiment

    KAUST Repository

    Saghir, Shahid; Bellaredj, Mohammed Lamine Faycal; Younis, Mohammad I.

    2016-01-01

    Microplates are building blocks of many Micro-Electro-Mechanical Systems (MEMS). It is common for them to undergo imperfections due to residual stresses caused by the micro fabrication process. Such plates are essentially different from perfectly

  10. MEMS-based transmission lines for microwave applications

    Science.gov (United States)

    Wu, Qun; Fu, Jiahui; Gu, Xuemai; Shi, Huajuan; Lee, Jongchul

    2003-04-01

    This paper mainly presents a briefly review for recent progress in MEMS-based transmission lines for use in microwave and millimeterwave range. MEMS-based transmission lines including different transmission line structure such as membrane-supported microstrip line microstrip line, coplanar microshield transmission line, LIGA micromachined planar transmission line, micromachined waveguides and coplanar waveguide are discussed. MEMS-based transmission lines are characterized by low propagation loss, wide operation frequency band, low dispersion and high quality factor, in addition, the fabrication is compatible with traditional processing of integrated circuits (IC"s). The emergence of MEMS-based transmission lines provided a solution for miniaturizing microwave system and monolithic microwave integrated circuits.

  11. MEMS Sensor Arrays for Cryogenic Propellant Applications, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — KWJ offers this proposal for a low-power, practical and versatile MEMS sensor platform for NASA applications. The proposed nano-sensor platform is ultra-low power...

  12. Control of Bouncing in MEMS Switches Using Double Electrodes

    KAUST Repository

    Abdul Rahim, Farhan; Younis, Mohammad I.

    2016-01-01

    This paper presents a novel way of controlling the bouncing phenomenon commonly present in the Radio Frequency Microelectromechanical Systems (RF MEMS) switches using a double-electrode configuration. The paper discusses modeling bouncing using both

  13. MEMS/Electronic Device Design and Characterization Facility

    Data.gov (United States)

    Federal Laboratory Consortium — This facility allows DoD to design and characterize state-of-the-art microelectromechanical systems (MEMS) and electronic devices. Device designers develop their own...

  14. RF MEMS Fractal Capacitors With High Self-Resonant Frequencies

    KAUST Repository

    Elshurafa, Amro M.; Emira, Ahmed; Radwan, Ahmed Gomaa; Salama, Khaled N.

    2012-01-01

    This letter demonstrates RF microelectromechanical systems (MEMS) fractal capacitors possessing the highest reported self-resonant frequencies (SRFs) in PolyMUMPS to date. Explicitly, measurement results show SRFs beyond 20 GHz. Furthermore, quality

  15. Designing Computer Systems with MEMS-Based Storage

    National Research Council Canada - National Science Library

    Schlosser, Steven

    2000-01-01

    .... An exciting new storage technology based on microelectromechanical systems (MEMS) is poised to fill a large portion of this performance gap, significantly reduce power consumption, and enable many new classes of applications...

  16. System integration design in MEMS – A case study of ...

    Indian Academy of Sciences (India)

    solutions in MEMS technology is very much felt that combine single chip integration .... chip are being used for temperature compensation and to balance the bridge configuration. ..... to the offset voltage, which reduces the span of the sensor.

  17. Mirror hybrid reactor optimization studies

    International Nuclear Information System (INIS)

    Bender, D.J.

    1976-01-01

    A system model of the mirror hybrid reactor has been developed. The major components of the model include (1) the reactor description, (2) a capital cost analysis, (3) various fuel management schemes, and (4) an economic analysis that includes the hybrid plus its associated fission burner reactors. The results presented describe the optimization of the mirror hybrid reactor, the objective being to minimize the cost of electricity from the hybrid fission-burner reactor complex. We have examined hybrid reactors with two types of blankets, one containing natural uranium, the other thorium. The major difference between the two optimized reactors is that the uranium hybrid is a significant net electrical power producer, whereas the thorium hybrid just about breaks even on electrical power. Our projected costs for fissile fuel production are approximately 50 $/g for 239 Pu and approximately 125 $/g for 233 U

  18. Mirror Fusion vacuum technology developments

    International Nuclear Information System (INIS)

    Batzer, T.H.; Call, W.R.

    1983-01-01

    Magnetic Mirror Fusion experiments, such as MFTF-B+T (Mirror Fusion Test Facility-B, Tritium Upgrade) and foreseeable follow-on devices, have operational and maintenance requirements that have not yet been fully demonstrated. Among those associated with vacuum technology are the very-high continuous-pumping speeds, 10 7 to 10 8 l/s for D 2 , T 2 and, to a lesser extent, He; the early detection of water leaks from the very-high heat-flux neutral-beam dumps and the detection and location of leaks in the superconducting magnets not protected by guard vacuums. Possible solutions to these problems have been identified and considerable progress has been made toward successfully demonstrating their feasibility

  19. Mirror fusion vacuum technology developments

    International Nuclear Information System (INIS)

    Batzer, T.H.; Call, W.R.

    1983-01-01

    Magnetic Mirror Fusion experiments, such as MFTF-B+T (Mirror Fusion Test Facility-B, Tritium Upgrade) and foreseeable follow-on devices, have operational and maintenance requirements that have not yet been fully demonstrated. Among those associated with vacuum technology are the very-high continuous-pumping speeds, 10 7 to 10 8 l/s for D 2 , T 2 and, to a lesser extent, He; the early detection of water leaks from the very-high heat-flux neutral-beam dumps and the detection and location of leaks in the superconducting magnets not protected by guard vacuums. Possible solutions to these problems have been identified and considerable progress has been made toward successfully demonstrating their feasibility

  20. Imitation, empathy, and mirror neurons.

    Science.gov (United States)

    Iacoboni, Marco

    2009-01-01

    There is a convergence between cognitive models of imitation, constructs derived from social psychology studies on mimicry and empathy, and recent empirical findings from the neurosciences. The ideomotor framework of human actions assumes a common representational format for action and perception that facilitates imitation. Furthermore, the associative sequence learning model of imitation proposes that experience-based Hebbian learning forms links between sensory processing of the actions of others and motor plans. Social psychology studies have demonstrated that imitation and mimicry are pervasive, automatic, and facilitate empathy. Neuroscience investigations have demonstrated physiological mechanisms of mirroring at single-cell and neural-system levels that support the cognitive and social psychology constructs. Why were these neural mechanisms selected, and what is their adaptive advantage? Neural mirroring solves the "problem of other minds" (how we can access and understand the minds of others) and makes intersubjectivity possible, thus facilitating social behavior.