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Sample records for mems deformable mirror

  1. MEMS deformable mirror CubeSat testbed

    Science.gov (United States)

    Cahoy, Kerri L.; Marinan, Anne D.; Novak, Benjamin; Kerr, Caitlin; Nguyen, Tam; Webber, Matthew; Falkenburg, Grant; Barg, Andrew; Berry, Kristen; Carlton, Ashley; Belikov, Ruslan; Bendek, Eduardo A.

    2013-09-01

    To meet the high contrast requirement of 1 × 10-10to image an Earth-like planet around a Sun-like star, space telescopes equipped with coronagraphs require wavefront control systems. Deformable mirrors are a key element of these systems that correct for optical imperfections, thermal distortions, and diffraction that would otherwise corrupt the wavefront and ruin the contrast. However, high-actuator-count MEMS deformable mirrors have yet to fly in space long enough to characterize their on-orbit performance and reduce risk by developing and operating their supporting systems. The goal of the MEMS Deformable Mirror CubeSat Testbed is to develop a CubeSat-scale demonstration of MEMS deformable mirror and wavefront sensing technology. In this paper, we consider two approaches for a MEMS deformable mirror technology demonstration payload that will fit within the mass, power, and volume constraints of a CubeSat: 1) a Michelson interferometer and 2) a Shack-Hartmann wavefront sensor. We clarify the constraints on the payload based on the resources required for supporting CubeSat subsystems drawn from subsystems that we have developed for a different CubeSat flight project. We discuss results from payload lab prototypes and their utility in defining mission requirements.

  2. Extreme-Precision MEMS Segmented Deformable Mirror, Phase II

    Data.gov (United States)

    National Aeronautics and Space Administration — In Phase I research, Iris AO developed enhanced electromechanical models and calibration techniques for MEMS-based segmented deformable mirrors (DMs) applicable to a...

  3. MEMS Deformable Mirrors for Adaptive Optics in Astronomical Imaging

    Science.gov (United States)

    Cornelissen, S.; Bierden, P. A.; Bifano, T.

    We report on the development of micro-electromechanical (MEMS) deformable mirrors designed for ground and space-based astronomical instruments intended for imaging extra-solar planets. Three different deformable mirror designs, a 1024 element continuous membrane (32x32), a 4096 element continuous membrane (64x64), and a 331 hexagonal segmented tip-tilt-piston are being produced for the Planet Imaging Concept Testbed Using a Rocket Experiment (PICTURE) program, the Gemini Planet Imaging Instrument, and the visible nulling coronograph developed at JPL for NASA's TPF mission, respectively. The design of these polysilicon, surface-micromachined MEMS deformable mirrors builds on technology that was pioneered at Boston University and has been used extensively to correct for ocular aberrations in retinal imaging systems and for compensation of atmospheric turbulence in free-space laser communication. These light-weight, low power deformable mirrors will have an active aperture of up to 25.2mm consisting of thin silicon membrane mirror supported by an array of 1024 to 4096 electrostatic actuators exhibiting no hysteresis and sub-nanometer repeatability. The continuous membrane deformable mirrors, coated with a highly reflective metal film, will be capable of up to 4μm of stroke, have a surface finish of travel. New design features and fabrication processes are combined with a proven device architecture to achieve the desired performance and high reliability. Presented in this paper are device characteristic and performance results of these devices.

  4. Wavefront control in space with MEMS deformable mirrors

    Science.gov (United States)

    Cahoy, Kerri L.; Marinan, Anne D.; Novak, Benjamin; Kerr, Caitlin; Webber, Matthew

    2013-03-01

    To meet the high contrast requirement of 1 × 10-10 to image an Earth-like planet around a Sun-like star, space telescopes equipped with coronagraphs require wavefront control systems. Deformable mirrors (DMs) are a key element of a wavefront control system, as they correct for imperfections, thermal distortions, and diffraction that would otherwise corrupt the wavefront and ruin the contrast. The goal of the CubeSat Deformable Mirror technology demonstration mission is to test the ability of a microelectromechanical system (MEMS) deformable mirror to perform wavefront control on-orbit on a nanosatellite platform. In this paper, we consider two approaches for a MEMS deformable mirror technology demonstration payload that will fit within the mass, power, and volume constraints of a CubeSat: 1) a Michelson interferometer and 2) a Shack-Hartmann wavefront sensor. We clarify the constraints on the payload based on the resources required for supporting CubeSat subsystems drawn from subsystems that we have developed for a different CubeSat flight project. We discuss results from payload lab prototypes and their utility in defining mission requirements.

  5. USB-based controller for generic MEM device deformable mirrors

    Science.gov (United States)

    Andrews, Jonathan; Teare, Scott; Wilcox, Christopher; Restaino, Sergio; Martinez, Ty; Payne, Don

    2006-01-01

    The use of Micro-Electro-Machined (MEM) devices as deformable mirrors (DM) for active and adaptive optics is increasing dramatically. Such increases are due to both the cost and simplicity of use of these devices. Our experience with MEM DMs has been positive, however the controlling protocols of these devices presents some issues. Based on our experience and needs we decided to design a generic controller based on a fast communication protocol. These requirements have pushed us to design a system around a USB 2.0 protocol. In this paper we present our architectural design for such controller. We present also experimental data and analysis on the performance of the controller. We describe the pros and cons of such approach versus other techniques. We will address how general such architecture is and how portable is to other systems.

  6. 10^3 Segment MEMS Deformable-Mirror Process Development, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — Iris AO will extend its proven segmented MEMS deformable mirror architecture to large array sizes required for high-contrast astrophysical imagers. Current...

  7. Modeling, Calibration and Control for Extreme-Precision MEMS Deformable Mirrors, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — Iris AO will develop electromechanical models and actuator calibration methods to enable open-loop control of MEMS deformable mirrors (DMs) with unprecedented...

  8. MEMS deformable mirror embedded wavefront sensing and control system

    Science.gov (United States)

    Owens, Donald; Schoen, Michael; Bush, Keith

    2006-01-01

    Electrostatic Membrane Deformable Mirror (MDM) technology developed using silicon bulk micro-machining techniques offers the potential of providing low-cost, compact wavefront control systems for diverse optical system applications. Electrostatic mirror construction using bulk micro-machining allows for custom designs to satisfy wavefront control requirements for most optical systems. An electrostatic MDM consists of a thin membrane, generally with a thin metal or multi-layer high-reflectivity coating, suspended over an actuator pad array that is connected to a high-voltage driver. Voltages applied to the array elements deflect the membrane to provide an optical surface capable of correcting for measured optical aberrations in a given system. Electrostatic membrane DM designs are derived from well-known principles of membrane mechanics and electrostatics, the desired optical wavefront control requirements, and the current limitations of mirror fabrication and actuator drive electronics. MDM performance is strongly dependent on mirror diameter and air damping in meeting desired spatial and temporal frequency requirements. In this paper, we present wavefront control results from an embedded wavefront control system developed around a commercially available high-speed camera and an AgilOptics Unifi MDM driver using USB 2.0 communications and the Linux development environment. This new product, ClariFast TM, combines our previous Clarifi TM product offering into a faster more streamlined version dedicated strictly to Hartmann Wavefront sensing.

  9. Design, modeling, and fabrication techniques of bulk PZT actuators for MEMS deformable mirrors

    Science.gov (United States)

    Xu, Xiaohui; Chu, Jiaru

    2007-12-01

    The paper describes the design, modeling and fabrication techniques of bulk PZT actuators for MEMS deformable mirrors. Both the analytical model and finite element method are employed for performance simulation and structure optimization of the bulk PZT actuator. According to the simulation results, thick PZT films with high d 31 piezoelectric coefficient are necessary for the deformable mirrors to obtain both high stiffness and large stroke at low voltage for applications in astronomical observation and retina imaging. The fabrication techniques for bulk PZT actuators for MEMS deformable mirrors are investigated, incorporating the bonding of bulk PZT ceramics to Si single crystals with epoxy resin, the thinning and patterning of bulk PZT ceramics using wet-etching method. 1BHF:2HCl:4NH 4Cl:4H IIO solution was used as the etchant. Using the fabrication techniques, we have successfully demonstrated a 4×4 prototype array of 2.5mm-diameter bulk PZT actuators for MEMS deformable mirrors. The bulk PZT actuators show a stroke of 3 μm at +/-25V and displacement hysteresis of 15%. The displacement hysteresis was largely eliminated by using the method of staying on the same segment.

  10. Ultraflat Tip-Tilt-Piston MEMS Deformable Mirror, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — It is proposed to develop a process for producing arrays of hexagonal mirror segments with deviation from flatness smaller than 1nm RMS over a 600?m segment span,...

  11. Surface micromachined MEMS deformable mirror based on hexagonal parallel-plate electrostatic actuator

    Science.gov (United States)

    Ma, Wenying; Ma, Changwei; Wang, Weimin

    2018-03-01

    Deformable mirrors (DM) based on microelectromechanical system (MEMS) technology are being applied in adaptive optics (AO) system for astronomical telescopes and human eyes more and more. In this paper a MEMS DM with hexagonal actuator is proposed and designed. The relationship between structural design and performance parameters, mainly actuator coupling, is analyzed carefully and calculated. The optimum value of actuator coupling is obtained. A 7-element DM prototype is fabricated using a commercial available standard three-layer polysilicon surface multi-user-MEMS-processes (PolyMUMPs). Some key performances, including surface figure and voltage-displacement curve, are measured through a 3D white light profiler. The measured performances are very consistent with the theoretical values. The proposed DM will benefit the miniaturization of AO systems and lower their cost.

  12. Design, fabrication and characterization of a bulk-PZT-actuated MEMS deformable mirror

    Science.gov (United States)

    Xu, Xiao-Hui; Li, Bao-Qing; Feng, Yan; Chu, Jia-Ru

    2007-12-01

    This paper describes the design, fabrication and characterization of a bulk-PZT-actuated MEMS deformable mirror (DM). An analytical model was employed to optimize the DM's structure. The fabrication techniques for PZT thick film actuators were also experimentally explored, including the bonding of bulk PZT ceramics and a silicon wafer by epoxy resin, and the thinning of the bulk PZT ceramics using a wet-etching method. A 10 × 10 array of 1.75 mm × 1.75 mm PZT thick film actuators was successfully fabricated. The PZT actuators showed a stroke of about 4.5 µm at 100 V. When a 36 µm thick silicon membrane mirror was assembled, the measured mirror deflection at 100 V was approximately 3.8 µm. The assembled DM showed an operating frequency bandwidth of 21 kHz and an influence function of approximately 30%. The displacement hysteresis was greatly eliminated by using the method of staying on the same segment.

  13. High Speed Magnetostrictive MEMS Actuated Mirror Deflectors, Phase II

    Data.gov (United States)

    National Aeronautics and Space Administration — The main goal of this proposal is to develop high speed magnetostrictive and MEMS actuators for rapidly deflecting or deforming mirrors. High speed, light-weight,...

  14. High Speed Magnetostrictive MEMS Actuated Mirror Deflectors, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — We propose to develop high speed magnetostrictive and MEMS actuators for rapidly deflecting or deforming mirrors. High speed, light-weight, low voltage beam...

  15. Deformable Mirrors Correct Optical Distortions

    Science.gov (United States)

    2010-01-01

    By combining the high sensitivity of space telescopes with revolutionary imaging technologies consisting primarily of adaptive optics, the Terrestrial Planet Finder is slated to have imaging power 100 times greater than the Hubble Space Telescope. To this end, Boston Micromachines Corporation, of Cambridge, Massachusetts, received Small Business Innovation Research (SBIR) contracts from the Jet Propulsion Laboratory for space-based adaptive optical technology. The work resulted in a microelectromechanical systems (MEMS) deformable mirror (DM) called the Kilo-DM. The company now offers a full line of MEMS DMs, which are being used in observatories across the world, in laser communication, and microscopy.

  16. Nanolaminate deformable mirrors

    Science.gov (United States)

    Papavasiliou, Alexandros P.; Olivier, Scot S.

    2009-04-14

    A deformable mirror formed out of two layers of a nanolaminate foil attached to a stiff substrate is introduced. Deformation is provided by an electrostatic force between two of the layers. The internal stiffness of the structure allows for high-spatial-frequency shapes. The nanolaminate foil of the present invention allows for a high-quality mirror surface. The device achieves high precision in the vertical direction by using foils with accurately controlled thicknesses, but does not require high precision in the lateral dimensions, allowing such mirrors to be fabricated using crude lithography techniques. Such techniques allow structures up to about the meter scale to be fabricated.

  17. Using MEMS mirrors to pattern electrical forces

    Science.gov (United States)

    Neale, Steven L.; Hsu, Hsan-Yin; Valley, Justin K.; Jamshidi, Arash; Wu, Ming C.

    2009-02-01

    By switching between two tilt angles MEMS mirrors can be used to produce spatial light patterns. This enables the Digital Micromirror Display (DMD, Texas Instruments) chip to produce the images found in some data projectors. In this paper we will show how these images can be converted into electrical patterns. We use the electrical gradients in these patterns to control the movement of particles through dielectrophoresis. We show how this can be used to move cells within PBS solution and characterize our device. We also discuss possible ways to improve our optical setup through Adaptive Optics (AO).

  18. CubeSat Deformable Mirror Demonstration

    Data.gov (United States)

    National Aeronautics and Space Administration — The goal of the CubeSat Deformable Mirror Demonstration is to characterize the performance of a small deformable mirror over a year in low-Earth orbit. Small form...

  19. Impact of large field angles on the requirements for deformable mirror in imaging satellites

    Science.gov (United States)

    Kim, Jae Jun; Mueller, Mark; Martinez, Ty; Agrawal, Brij

    2018-04-01

    For certain imaging satellite missions, a large aperture with wide field-of-view is needed. In order to achieve diffraction limited performance, the mirror surface Root Mean Square (RMS) error has to be less than 0.05 waves. In the case of visible light, it has to be less than 30 nm. This requirement is difficult to meet as the large aperture will need to be segmented in order to fit inside a launch vehicle shroud. To reduce this requirement and to compensate for the residual wavefront error, Micro-Electro-Mechanical System (MEMS) deformable mirrors can be considered in the aft optics of the optical system. MEMS deformable mirrors are affordable and consume low power, but are small in size. Due to the major reduction in pupil size for the deformable mirror, the effective field angle is magnified by the diameter ratio of the primary and deformable mirror. For wide field of view imaging, the required deformable mirror correction is field angle dependant, impacting the required parameters of a deformable mirror such as size, number of actuators, and actuator stroke. In this paper, a representative telescope and deformable mirror system model is developed and the deformable mirror correction is simulated to study the impact of the large field angles in correcting a wavefront error using a deformable mirror in the aft optics.

  20. Deformable mirrors development program at ESO

    Science.gov (United States)

    Stroebele, Stefan; Vernet, Elise; Brinkmann, Martin; Jakob, Gerd; Lilley, Paul; Casali, Mark; Madec, Pierre-Yves; Kasper, Markus

    2016-07-01

    Over the last decade, adaptive optics has become essential in different fields of research including medicine and industrial applications. With this new need, the market of deformable mirrors has expanded a lot allowing new technologies and actuation principles to be developed. Several E-ELT instruments have identified the need for post focal deformable mirrors but with the increasing size of the telescopes the requirements on the deformable mirrors become more demanding. A simple scaling up of existing technologies from few hundred actuators to thousands of actuators will not be sufficient to satisfy the future needs of ESO. To bridge the gap between available deformable mirrors and the future needs for the E-ELT, ESO started a development program for deformable mirror technologies. The requirements and the path to get the deformable mirrors for post focal adaptive optics systems for the E-ELT is presented.

  1. Mounting with compliant cylinders for deformable mirrors.

    Science.gov (United States)

    Reinlein, Claudia; Goy, Matthias; Lange, Nicolas; Appelfelder, Michael

    2015-04-01

    A method is presented to mount large aperture unimorph deformable mirrors by compliant cylinders (CC). The CCs are manufactured from a soft silicone, and shear testing is performed in order to evaluate the Young's modulus. A scale mirror model is assembled to evaluate mount-induced change of piezoelectric deformation, and its applicability for tightly focusing mirrors. Experiments do not show any decrease of piezoelectric stroke. Further it is shown that the changes of surface fidelity by the attachment of the deformable mirror to its mount are neglectable.

  2. Lead salt resonant cavity enhanced detector with MEMS mirror

    Science.gov (United States)

    Felder, F.; Fill, M.; Rahim, M.; Zogg, H.; Quack, N.; Blunier, S.; Dual, J.

    2010-01-01

    We describe a tunable resonant cavity enhanced detector (RCED) for the mid-infrared employing narrow gap lead-chalcogenide (IV-VI) layers on a Si substrate. The device consists of an epitaxial Bragg reflector layer, a thin p-n+ heterojunction with PbSrTe as detecting layer and a micro-electro-mechanical system (MEMS) micromirror as second mirror. Despite the thin absorber layer the sensitivity is even higher than for a conventional detector. Tunability is achieved by changing the cavity length with a vertically movable MEMS mirror. The device may be used as miniature infrared spectrometer to cover the spectral range from 30 μm.

  3. Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning

    Science.gov (United States)

    Hofmann, U.; Aikio, M.; Janes, J.; Senger, F.; Stenchly, V.; Weiss, M.; Quenzer, H.-J.; Wagner, B.; Benecke, W.

    2013-03-01

    Low-cost automotive laser scanners for environment perception are needed to enable the integration of advanced driver assistant systems (ADAS) into all automotive vehicle segments, a key to reducing the number of traffic accidents on roads. An omnidirectional 360 degree laser scanning concept has been developed based on combination of an omnidirectional lens and a biaxial large aperture MEMS mirror. This omnidirectional scanning concept is the core of a small sized low-cost time-of-flight based range sensor development. This paper describes concept, design, fabrication and first measurement results of a resonant biaxial 7mm gimbal-less MEMS mirror that is electrostatically actuated by stacked vertical comb drives. Identical frequencies of the two resonant axes are necessary to enable the required circle scanning capability. A tripod suspension was chosen since it allows minimizing the frequency splitting of the two resonant axes. Low mirror curvature is achieved by a thickness of the mirror of more than 500 μm. Hermetic wafer level vacuum packaging of such large mirrors based on multiple wafer bonding has been developed to enable to achieve a large mechanical tilt angle of +/- 6.5 degrees in each axis. The 7mm-MEMS mirror demonstrates large angle circular scanning at 1.5kHz.

  4. Modeling of MEMS Mirrors Actuated by Phase-Change Mechanism

    Directory of Open Access Journals (Sweden)

    David Torres

    2017-04-01

    Full Text Available Given the multiple applications for micro-electro-mechanical system (MEMS mirror devices, most of the research efforts are focused on improving device performance in terms of tilting angles, speed, and their integration into larger arrays or systems. The modeling of these devices is crucial for enabling a platform, in particular, by allowing for the future control of such devices. In this paper, we present the modeling of a MEMS mirror structure with four actuators driven by the phase-change of a thin film. The complexity of the device structure and the nonlinear behavior of the actuation mechanism allow for a comprehensive study that encompasses simpler electrothermal designs, thus presenting a general approach that can be adapted to most MEMS mirror designs based on this operation principle. The MEMS mirrors presented in this work are actuated by Joule heating and tested using optical techniques. Mechanical and thermal models including both pitch and roll displacements are developed by combining theoretical analysis (using both numerical and analytical tools with experimental data and subsequently verifying with quasi-static and dynamic experiments.

  5. High-resolution adaptive optics scanning laser ophthalmoscope with multiple deformable mirrors

    Science.gov (United States)

    Chen, Diana C.; Olivier, Scot S.; Jones; Steven M.

    2010-02-23

    An adaptive optics scanning laser ophthalmoscopes is introduced to produce non-invasive views of the human retina. The use of dual deformable mirrors improved the dynamic range for correction of the wavefront aberrations compared with the use of the MEMS mirror alone, and improved the quality of the wavefront correction compared with the use of the bimorph mirror alone. The large-stroke bimorph deformable mirror improved the capability for axial sectioning with the confocal imaging system by providing an easier way to move the focus axially through different layers of the retina.

  6. Driver ASICs for Advanced Deformable Mirrors Project

    Data.gov (United States)

    National Aeronautics and Space Administration — The program leverages on our extensive expertise in developing high-performance driver ASICs for deformable mirror systems and seeks to expand the capacities of the...

  7. Fabrication Process Development for Light Deformable Mirrors

    Data.gov (United States)

    National Aeronautics and Space Administration — The project objective is to develop robust, reproductibble fabrication processes to realize functional deformable membrane mirrors (DM) for a space mission in which...

  8. High Resolution Silicon Deformable Mirrors, Phase II

    Data.gov (United States)

    National Aeronautics and Space Administration — In this proposal we describe a plan to build a deformable mirror suitable for space-based operation in systems for high-resolution imaging. The prototype DM will be...

  9. High Resolution Silicon Deformable Mirrors, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — This proposal describes a plan to build a prototype small stroke, high precision deformable mirror suitable for space-based operation in systems for high-resolution...

  10. Photoacoustic endomicroscopy based on a MEMS scanning mirror.

    Science.gov (United States)

    Guo, Heng; Song, Chaolong; Xie, Huikai; Xi, Lei

    2017-11-15

    In this Letter, we present a high-resolution photoacoustic endomicroscopy probe based on a microelectromechanical systems (MEMS) scanning mirror. The built-in optical assembly consists of a 0.7 mm graded-index (GRIN) lens for light focusing and a ϕ1  mm MEMS mirror to reflect and scan the beam. A miniaturized unfocused ultrasound transducer with a center frequency of 10 MHz is used for photoacoustic detection. Sharp blades, carbon fibers, and black tapes were utilized to evaluate the performance of the system. In vivo mouse ears and resected rectums were imaged to further demonstrate the feasibility of this probe for potential biological and clinical applications.

  11. Multiphysics & Parallel Kinematics Modeling of a 3DOF MEMS Mirror

    Directory of Open Access Journals (Sweden)

    Mamat N.

    2015-01-01

    Full Text Available This paper presents a modeling for a 3DoF electrothermal actuated micro-electro-mechanical (MEMS mirror used to achieve scanning for optical coherence tomography (OCT imaging. The device is integrated into an OCT endoscopic probe, it is desired that the optical scanner have small footprint for minimum invasiveness, large and flat optical aperture for large scanning range, low driving voltage and low power consumption for safety reason. With a footprint of 2mm×2mm, the MEMS scanner which is also called as Tip-Tilt-Piston micro-mirror, can perform two rotations around x and y-axis and a vertical translation along z-axis. This work develops a complete model and experimental characterization. The modeling is divided into two parts: multiphysics characterization of the actuators and parallel kinematics studies of the overall system. With proper experimental procedures, we are able to validate the model via Visual Servoing Platform (ViSP. The results give a detailed overview on the performance of the mirror platform while varying the applied voltage at a stable working frequency. The paper also presents a discussion on the MEMS control system based on several scanning trajectories.

  12. Active Beam Shaping System and Method Using Sequential Deformable Mirrors

    Science.gov (United States)

    Norman, Colin A. (Inventor); Pueyo, Laurent A. (Inventor)

    2015-01-01

    An active optical beam shaping system includes a first deformable mirror arranged to at least partially intercept an entrance beam of light and to provide a first reflected beam of light, a second deformable mirror arranged to at least partially intercept the first reflected beam of light from the first deformable mirror and to provide a second reflected beam of light, and a signal processing and control system configured to communicate with the first and second deformable mirrors. The first deformable mirror, the second deformable mirror and the signal processing and control system together provide a large amplitude light modulation range to provide an actively shaped optical beam.

  13. Wide-angle structured light with a scanning MEMS mirror in liquid.

    Science.gov (United States)

    Zhang, Xiaoyang; Koppal, Sanjeev J; Zhang, Rui; Zhou, Liang; Butler, Elizabeth; Xie, Huikai

    2016-02-22

    Microelectromechanical (MEMS) mirrors have extended vision capabilities onto small, low-power platforms. However, the field-of-view (FOV) of these MEMS mirrors is usually less than 90° and any increase in the MEMS mirror scanning angle has design and fabrication trade-offs in terms of power, size, speed and stability. Therefore, we need techniques to increase the scanning range while still maintaining a small form factor. In this paper we exploit our recent breakthrough that has enabled the immersion of MEMS mirrors in liquid. While allowing the MEMS to move, the liquid additionally provides a "Snell's window" effect and enables an enlarged FOV (≈ 150°). We present an optimized MEMS mirror design and use it to demonstrate applications in extreme wide-angle structured light.

  14. Mirror deformation versus contact area in mounted flat mirrors

    Science.gov (United States)

    Clark, James H., III; Penado, F. Ernesto; Cornelius, Frank

    2009-08-01

    Surface flatness of 6-inch diameter mirrors at the Navy Prototype Optical Interferometer is specified to be within 32 nanometers over a 5.4-inch diameter circle centered on the mirror. The current mounting technique is to use three spring plungers applied to the back surface of the mirror, near the perimeter edge, thereby pressing the front surface against three small diameter Teflon pads directly opposite the plungers. The pads have the effect of dissipating the deformation effects within the 5.4-inch diameter region. This paper describes the effects of varying the size of the pads, from a 7/32 inch diameter pad to a point-type contact such as a ball bearing. Experimental results using a phase shifting interferometer are presented, as well as finite element analysis results.

  15. Deformable Mirrors Capture Exoplanet Data, Reflect Lasers

    Science.gov (United States)

    2014-01-01

    To image and characterize exoplanets, Goddard Space Flight Center turned to deformable mirrors (DMs). Berkeley, California-based Iris AO, Inc. worked with Goddard through the SBIR program to improve the company’s microelectromechanical DMs, which are now being evaluated and used for biological research, industrial applications, and could even be used by drug manufacturers.

  16. Fabrication Methods for Adaptive Deformable Mirrors

    Science.gov (United States)

    Toda, Risaku; White, Victor E.; Manohara, Harish; Patterson, Keith D.; Yamamoto, Namiko; Gdoutos, Eleftherios; Steeves, John B.; Daraio, Chiara; Pellegrino, Sergio

    2013-01-01

    Previously, it was difficult to fabricate deformable mirrors made by piezoelectric actuators. This is because numerous actuators need to be precisely assembled to control the surface shape of the mirror. Two approaches have been developed. Both approaches begin by depositing a stack of piezoelectric films and electrodes over a silicon wafer substrate. In the first approach, the silicon wafer is removed initially by plasmabased reactive ion etching (RIE), and non-plasma dry etching with xenon difluoride (XeF2). In the second approach, the actuator film stack is immersed in a liquid such as deionized water. The adhesion between the actuator film stack and the substrate is relatively weak. Simply by seeping liquid between the film and the substrate, the actuator film stack is gently released from the substrate. The deformable mirror contains multiple piezoelectric membrane layers as well as multiple electrode layers (some are patterned and some are unpatterned). At the piezolectric layer, polyvinylidene fluoride (PVDF), or its co-polymer, poly(vinylidene fluoride trifluoroethylene P(VDF-TrFE) is used. The surface of the mirror is coated with a reflective coating. The actuator film stack is fabricated on silicon, or silicon on insulator (SOI) substrate, by repeatedly spin-coating the PVDF or P(VDFTrFE) solution and patterned metal (electrode) deposition. In the first approach, the actuator film stack is prepared on SOI substrate. Then, the thick silicon (typically 500-micron thick and called handle silicon) of the SOI wafer is etched by a deep reactive ion etching process tool (SF6-based plasma etching). This deep RIE stops at the middle SiO2 layer. The middle SiO2 layer is etched by either HF-based wet etching or dry plasma etch. The thin silicon layer (generally called a device layer) of SOI is removed by XeF2 dry etch. This XeF2 etch is very gentle and extremely selective, so the released mirror membrane is not damaged. It is possible to replace SOI with silicon

  17. All-optical photoacoustic microscopy using a MEMS scanning mirror

    Science.gov (United States)

    Chen, Sung-Liang; Xie, Zhixing; Ling, Tao; Wei, Xunbin; Guo, L. Jay; Wang, Xueding

    2013-03-01

    It has been studied that a potential marker to obtain prognostic information about bladder cancer is tumor neoangiogenesis, which can be quantified by morphometric characteristics such as microvascular density. Photoacoustic microscopy (PAM) can render sensitive three-dimensional (3D) mapping of microvasculature, providing promise to evaluate the neoangiogenesis that is closely related to the diagnosis of bladder cancer. To ensure good image quality, it is desired to acquire bladder PAM images from its inside via the urethra, like conventional cystoscope. Previously, we demonstrated all-optical PAM systems using polymer microring resonators to detect photoacoustic signals and galvanometer mirrors for laser scanning. In this work, we build a miniature PAM system using a microelectromechanical systems (MEMS) scanning mirror, demonstrating a prototype of an endoscopic PAM head capable of high imaging quality of the bladder. The system has high resolutions of 17.5 μm in lateral direction and 19 μm in the axial direction at a distance of 5.4 mm. Images of printed grids and the 3D structure of microvasculature in animal bladders ex vivo by the system are demonstrated.

  18. Design of the deformable mirror demonstration CubeSat (DeMi)

    Science.gov (United States)

    Douglas, Ewan S.; Allan, Gregory; Barnes, Derek; Figura, Joseph S.; Haughwout, Christian A.; Gubner, Jennifer N.; Knoedler, Alex A.; LeClair, Sarah; Murphy, Thomas J.; Skouloudis, Nikolaos; Merck, John; Opperman, Roedolph A.; Cahoy, Kerri L.

    2017-09-01

    The Deformable Mirror Demonstration Mission (DeMi) was recently selected by DARPA to demonstrate in-space operation of a wavefront sensor and Microelectromechanical system (MEMS) deformable mirror (DM) payload on a 6U CubeSat. Space telescopes designed to make high-contrast observations using internal coronagraphs for direct characterization of exoplanets require the use of high-actuator density deformable mirrors. These DMs can correct image plane aberrations and speckles caused by imperfections, thermal distortions, and diffraction in the telescope and optics that would otherwise corrupt the wavefront and allow leaking starlight to contaminate coronagraphic images. DeMi is provide on-orbit demonstration and performance characterization of a MEMS deformable mirror and closed loop wavefront sensing. The DeMi payload has two operational modes, one mode that images an internal light source and another mode which uses an external aperture to images stars. Both the internal and external modes include image plane and pupil plane wavefront sensing. The objectives of the internal measurement of the 140-actuator MEMS DM actuator displacement are characterization of the mirror performance and demonstration of closed-loop correction of aberrations in the optical path. Using the external aperture to observe stars of magnitude 2 or brighter, assuming 3-axis stability with less than 0.1 degree of attitude knowledge and jitter below 10 arcsec RMSE, per observation, DeMi will also demonstrate closed loop wavefront control on an astrophysical target. We present an updated payload design, results from simulations and laboratory optical prototyping, as well as present our design for accommodating high-voltage multichannel drive electronics for the DM on a CubeSat.

  19. Advanced Actuator Concepts for High Precision Deformable Mirrors, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — TRS Technologies proposes to develop a variety of single crystal actuators for adaptive optics deformable mirrors. Single crystal piezoelectric actuators are...

  20. Large aperture nanocomposite deformable mirror technology

    Science.gov (United States)

    Chen, Peter C.; Hale, Richard D.

    2007-12-01

    We report progress in the development of deformable mirrors (DM) using nanocomposite materials. For the extremely large telescopes (ELTs) currently being planned, a new generation of DMs with unprecedented performance is a critical path item. The DMs need to have large apertures (meters), continuous surfaces, and low microroughness. Most importantly, they must have excellent static optical figures and yet be sufficiently thin (1-2 mm) and flexible to function with small, low powered actuators. Carbon fiber reinforced plastics (CFRP) have the potential to fulfill these requirements. However, CFRP mirrors made using direct optical replication have encountered a number of problems. Firstly, it is difficult if not impossible for a CFRP mirror to maintain a good static optical figure if a small number of plies are used, but adding more plies to the laminate tends to make the substrate too thick and stiff. Secondly, direct optical replication requires precision mandrels, the costs of which become prohibitive at multi-meter apertures. We report development of a new approach. By using a combination of a novel support structure, selected fibers, and binding resins infused with nanoparticles, it is possible to make millimeter thick optical mirrors that can both maintain good static optical figures and yet still have the required flexibility for actuation. Development and refinement of a non-contact, deterministic process of fine figuring permits generation of accurate optical surfaces without the need for precision optical mandrels. We present data from tests that have been carried out to demonstrate these new processes. A number of flat DMs have been fabricated, as well as concave and convex DMs in spherical, parabolic, and other forms.

  1. Terahertz adaptive optics with a deformable mirror.

    Science.gov (United States)

    Brossard, Mathilde; Sauvage, Jean-François; Perrin, Mathias; Abraham, Emmanuel

    2018-04-01

    We report on the wavefront correction of a terahertz (THz) beam using adaptive optics, which requires both a wavefront sensor that is able to sense the optical aberrations, as well as a wavefront corrector. The wavefront sensor relies on a direct 2D electro-optic imaging system composed of a ZnTe crystal and a CMOS camera. By measuring the phase variation of the THz electric field in the crystal, we were able to minimize the geometrical aberrations of the beam, thanks to the action of a deformable mirror. This phase control will open the route to THz adaptive optics in order to optimize the THz beam quality for both practical and fundamental applications.

  2. Overview of deformable mirror technologies for adaptive optics and astronomy

    Science.gov (United States)

    Madec, P.-Y.

    2012-07-01

    From the ardent bucklers used during the Syracuse battle to set fire to Romans’ ships to more contemporary piezoelectric deformable mirrors widely used in astronomy, from very large voice coil deformable mirrors considered in future Extremely Large Telescopes to very small and compact ones embedded in Multi Object Adaptive Optics systems, this paper aims at giving an overview of Deformable Mirror technology for Adaptive Optics and Astronomy. First the main drivers for the design of Deformable Mirrors are recalled, not only related to atmospheric aberration compensation but also to environmental conditions or mechanical constraints. Then the different technologies available today for the manufacturing of Deformable Mirrors will be described, pros and cons analyzed. A review of the Companies and Institutes with capabilities in delivering Deformable Mirrors to astronomers will be presented, as well as lessons learned from the past 25 years of technological development and operation on sky. In conclusion, perspective will be tentatively drawn for what regards the future of Deformable Mirror technology for Astronomy.

  3. Analysis and test of a piezoelectric deformable mirror

    Science.gov (United States)

    Wang, Dan; Li, Chaoming; Wu, Jianhong

    2010-10-01

    Adaptive optics is concerned with correcting a distorted wavefront by introducing a counter aberration into an element of the optical system, it use widely in astronomy and there are also applications in microscopy, the writing of 3D optical bit memory and photo-fabrication now. As an active correction element in adaptive optics, a deformable mirror can be used to modify the phase of the beam actively. In this paper, the active wave front correction method of adaptive optics system is studied, types and characteristics of the actuators of deformable mirror are analyzed, and mainly introduces piezoelectric deformable mirror. According to the conclusion of theoretical analysis, if the material is selected, diameter and thickness of the deformable mirror are given, the displacement of the deformable mirror is directly proportional to the initial loads. A deformable mirror has been manufactured with silica. The silica plate is 100mm in diameter and 10mm in thick. 37-electrode piezoelectric actuators are selected to correct low-order aberrations. Based on the ANSYS software, the finite element analysis model of deformable mirror is calculated. The influence of the major structural parameters is discussed. The calculated result and the conclusion of theoretical analysis are compared. Results show that, the endless improvement of finite element model is necessary and feasible. The value of optimization design and the conclusion of theoretical analysis are consistent with each other. The research we do lay the foundation for the further study with more actuators and correcting high-frequency aberration.

  4. Model-Based Angular Scan Error Correction of an Electrothermally-Actuated MEMS Mirror.

    Science.gov (United States)

    Zhang, Hao; Xu, Dacheng; Zhang, Xiaoyang; Chen, Qiao; Xie, Huikai; Li, Suiqiong

    2015-12-10

    In this paper, the actuation behavior of a two-axis electrothermal MEMS (Microelectromechanical Systems) mirror typically used in miniature optical scanning probes and optical switches is investigated. The MEMS mirror consists of four thermal bimorph actuators symmetrically located at the four sides of a central mirror plate. Experiments show that an actuation characteristics difference of as much as 4.0% exists among the four actuators due to process variations, which leads to an average angular scan error of 0.03°. A mathematical model between the actuator input voltage and the mirror-plate position has been developed to predict the actuation behavior of the mirror. It is a four-input, four-output model that takes into account the thermal-mechanical coupling and the differences among the four actuators; the vertical positions of the ends of the four actuators are also monitored. Based on this model, an open-loop control method is established to achieve accurate angular scanning. This model-based open loop control has been experimentally verified and is useful for the accurate control of the mirror. With this control method, the precise actuation of the mirror solely depends on the model prediction and does not need the real-time mirror position monitoring and feedback, greatly simplifying the MEMS control system.

  5. Compact Low-Power Driver for Deformable Mirror Systems Project

    Data.gov (United States)

    National Aeronautics and Space Administration — Boston Micromachines Corporation (BMC), a leading developer of unique, high-resolution micromachined deformable mirrors (DMs), will develop a compact, low-power,...

  6. Industrial Assessment on Deformable Mirrors (Without Proprietary Information)

    National Research Council Canada - National Science Library

    Veitch, Lisa

    1998-01-01

    ...) conducted during FY 1997-1998. The objective of the study was to determine if there were more potential deformable mirror suppliers than the one company that was identified and to identify possible alternatives to the present...

  7. Single Crystal Bimorph Array Driven Deformable Mirrors, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — This Small Business Innovation Research (SBIR) Phase I project will research a novel deformable mirror design for NASA adaptive optics telescope applications . The...

  8. Validation of a new adaptive deformable mirror concept

    NARCIS (Netherlands)

    Hamelinck, R.F.M.M.; Ellenbroek, R.; Rosielle, N.; Steinbuch, M.; Verhaegen, M.; Doelman, N.J.

    2008-01-01

    A new prototype adaptive deformable mirror for future AO-systems is presented that consists of a thin continuous membrane on which push-pull actuators impose out-of-plane displacements. Each actuator has ±10μm stroke, nanometer resolution and only mW's heat dissipation. The mirror's modular design

  9. Nonlinear Dynamic Behavior of a Bi-Axial Torsional MEMS Mirror with Sidewall Electrodes

    Directory of Open Access Journals (Sweden)

    Mehmet Ozdogan

    2016-03-01

    Full Text Available Nonlinear dynamic responses of a Micro-Electro-Mechanical Systems (MEMS mirror with sidewall electrodes are presented that are in close agreement with previously-reported experimental data. An analysis of frequency responses reveals softening behavior, and secondary resonances originated from the dominant quadratic nonlinearity. The quadratic nonlinearity is an electromechanical coupling effect caused by the electrostatic force. This effect is reflected in our mathematical model used to simulate the dynamic response of the micro-mirror. The effects of increased forcing and decreased damping on the frequency response are investigated as the mirrors are mostly used in vacuum packages. The results can predict MEMS mirror behaviors in optical devices better than previously-reported models.

  10. Distributed microscopic actuation analysis of deformable plate membrane mirrors

    Science.gov (United States)

    Lu, Yifan; Yue, Honghao; Deng, Zongquan; Tzou, Hornsen

    2018-02-01

    To further reduce the areal density of optical mirrors used in space telescopes and other space-borne optical structures, the concept of flexible membrane deformable mirror has been proposed. Because of their high flexibility, poor stiffness and low damping properties, environmental excitations such as orbital maneuver, path changing, and non-uniform heating may induce unexpected vibrations and thus reduce working performance. Therefore, active vibration control is essential for these membrane mirrors. In this paper, two different mirror models, i.e., the plate membrane model and pure membrane model, are studied respectively. In order to investigate the modal vibration characteristics of the mirror, a piezoelectric layer is fully laminated on its non-reflective side to serve as actuators. Dynamic equations of the mirror laminated with piezoelectric actuators are presented first. Then, the actuator induced modal control force is defined. When the actuator area shrinks to infinitesimal, the expressions of microscopic local modal control force and its two components are obtained to predict the spatial microscopic actuation behavior of the mirror. Different membrane pretension forces are also applied to reveal the tension effects on the actuation of the mirror. Analyses indicate that the spatial distribution of modal micro-control forces is exactly the same with the sensing signals distribution of the mirror, which provides crucial guidelines for optimal actuator placement of membrane deformable mirrors.

  11. An image stabilization optical system using deformable freeform mirrors.

    Science.gov (United States)

    Hao, Qun; Cheng, Xuemin; Kang, Jiqiang; Jiang, Yuhua

    2015-01-15

    An image stabilization optical system using deformable freeform mirrors is proposed that enables the ray sets to couple dynamically in the object and image space. It aims to correct image blurring and degradation when there is relative movement between the imaging optical axis and the object. In this method, Fermat's principle and matrix methods are used to describe the optical path of the entire optical system with a shift object plane and a fixed corresponding image plane in the carrier coordinate system. A constant optical path length is determined for each ray set, so the correspondence between the object and the shift free image point is used to calculate the solution to the points on the surface profile of the deformable mirrors (DMs). Off-axis three-mirror anastigmats are used to demonstrate the benefits of optical image stabilization with one- and two-deformable mirrors.

  12. [Design and implementation of a long wavelength near infrared spectrometer based on MEMS scanning mirror].

    Science.gov (United States)

    Ye, Kun-Tao; Dong, Tai-Yuan; He, Wen-Xi; Li, Yu-Xiao; Cheng, Xian-Ming; Li, Guang-Yong; Li, Hao-Yu; Xu, Hao-Yu

    2014-10-01

    Long Wavelength Near InfraRed (LW-NIR) spectrometer has wide applications. Miniaturization and low-cost are two major goals of the development of LW-NIR spectrometer in the industrial or research community. Under the background that having a trend of spectrometer miniaturization and integration, method and main problems involved in miniaturization of LW-NIR spectrometer through MEMS scanning mirror, such as the design strategy of the light-splitting optical system, selection considerations of the MEMS scanning mirror, design method of the preamplifier circuit, etc, have been presented in detail. A prototype of miniaturized LW-NIR spectrometer, with the spectrum range of detection of 900-2,055 nm, is designed and implemented using MEMS scanning mirror, InGaAs single detector unit with high sensitivity. Littrow optical layout is used for its light-splitting optical system, and the spectral resolution is between 9.4-16 nm at 1,000-1,965 nm detection wavelength range. The prototype is successfully applied in LW-NIR spectrum measurement on pure water and ethanol aqueous solution, and a forecast analysis on ethanol aqueous solution concentration is also demonstrated. Through adopting MEMS scanning mirror into the spectrometer system, the complexity of the mechanical scanning fixtures and its controlling mechanism is greatly reduced therefore the size of the spectrometer is reduced. Furthermore, due to MEMS scanning mirror technology, LW-NIR spectrometer with single InGaAs detector is achieved, thus the cost reduction of the NIR spectrometer system is also realized because the expensive InGaAs arrays are avoided.

  13. Zernike polynomial based Rayleigh-Ritz model of a piezoelectric unimorph deformable mirror

    CSIR Research Space (South Africa)

    Long, CS

    2012-04-01

    Full Text Available Piezoelectric bimorph- or unimorph-type deformable mirrors are commonly used in adaptive optics to correct for time-dependent phase aberrations. In the optics community, the surface deformations that deformable mirrors are required to achieve...

  14. A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph

    Directory of Open Access Journals (Sweden)

    Xiaoyang Zhang

    2015-12-01

    Full Text Available This paper reports a large-range electrothermal bimorph microelectromechanical systems (MEMS mirror with fast thermal response. The actuator of the MEMS mirror is made of three segments of Cu/W bimorphs for lateral shift cancelation and two segments of multimorph beams for obtaining large vertical displacement from the angular motion of the bimorphs. The W layer is also used as the embedded heater. The silicon underneath the entire actuator is completely removed using a unique backside deep-reactive-ion-etching DRIE release process, leading to improved thermal response speed and front-side mirror surface protection. This MEMS mirror can perform both piston and tip-tilt motion. The mirror generates large pure vertical displacement up to 320 μm at only 3 V with a power consumption of 56 mW for each actuator. The maximum optical scan angle achieved is ±18° at 3 V. The measured thermal response time is 15.4 ms and the mechanical resonances of piston and tip-tilt modes are 550 Hz and 832 Hz, respectively.

  15. UAV-borne lidar with MEMS mirror-based scanning capability

    Science.gov (United States)

    Kasturi, Abhishek; Milanovic, Veljko; Atwood, Bryan H.; Yang, James

    2016-05-01

    Firstly, we demonstrated a wirelessly controlled MEMS scan module with imaging and laser tracking capability which can be mounted and flown on a small UAV quadcopter. The MEMS scan module was reduced down to a small volume of <90mm x 60mm x 40mm, weighing less than 40g and consuming less than 750mW of power using a ~5mW laser. This MEMS scan module was controlled by a smartphone via Bluetooth while flying on a drone, and could project vector content, text, and perform laser based tracking. Also, a "point-and-range" LiDAR module was developed for UAV applications based on low SWaP (Size, Weight and Power) gimbal-less MEMS mirror beam-steering technology and off-the-shelf OEM LRF modules. For demonstration purposes of an integrated laser range finder module, we used a simple off-the-shelf OEM laser range finder (LRF) with a 100m range, +/-1.5mm accuracy, and 4Hz ranging capability. The LRFs receiver optics were modified to accept 20° of angle, matching the transmitter's FoR. A relatively large (5.0mm) diameter MEMS mirror with +/-10° optical scanning angle was utilized in the demonstration to maintain the small beam divergence of the module. The complete LiDAR prototype can fit into a small volume of <70mm x 60mm x 60mm, and weigh <50g when powered by the UAV's battery. The MEMS mirror based LiDAR system allows for ondemand ranging of points or areas within the FoR without altering the UAV's position. Increasing the LRF ranging frequency and stabilizing the pointing of the laser beam by utilizing the onboard inertial sensors and the camera are additional goals of the next design.

  16. Experimental and theoretical study of deformable mirror actuator arrays

    Science.gov (United States)

    Pilar, Jan; Bonora, Stefano; Lucianetti, Antonio; Jelinkova, Helena; Mocek, Tomas

    2015-01-01

    Deformable mirrors have gained increasing interest in many different fields of application including laser physics, and they are becoming a universal tool for correcting optical aberrations of laser beams especially in large scale laser systems. One of the most common types of deformable mirror is a bimorph design which uses two plates of piezomaterial to which single electrodes are connected. These electrodes form the actuator array and their layout defines the resulting performance of the mirror to some extent. In the end all types of deformable mirrors currently used use an actuator array of some sort. To estimate the significance and effect of different actuator layout and shapes of actuators, an experimental study was performed. Four different commonly used actuator arrays were compared using photo-controlled deformable mirror. Using such device allows to study the effect of actuator layout separately from all other effects, since the device remains the same including all its imperfections. The experimental results are compared with numerical simulations and discussion is presented.

  17. Design and Modeling of Polysilicon Electrothermal Actuators for a MEMS Mirror with Low Power Consumption

    Directory of Open Access Journals (Sweden)

    Miguel Lara-Castro

    2017-06-01

    Full Text Available Endoscopic optical-coherence tomography (OCT systems require low cost mirrors with small footprint size, out-of-plane deflections and low bias voltage. These requirements can be achieved with electrothermal actuators based on microelectromechanical systems (MEMS. We present the design and modeling of polysilicon electrothermal actuators for a MEMS mirror (100 μm × 100 μm × 2.25 μm. These actuators are composed by two beam types (2.25 μm thickness with different cross-section area, which are separated by 2 μm gap. The mirror and actuators are designed through the Sandia Ultra-planar Multi-level MEMS Technology V (SUMMiT V® process, obtaining a small footprint size (1028 μm × 1028 µm for actuators of 550 µm length. The actuators have out-of-plane displacements caused by low dc voltages and without use material layers with distinct thermal expansion coefficients. The temperature behavior along the actuators is calculated through analytical models that include terms of heat energy generation, heat conduction and heat energy loss. The force method is used to predict the maximum out-of-plane displacements in the actuator tip as function of supplied voltage. Both analytical models, under steady-state conditions, employ the polysilicon resistivity as function of the temperature. The electrothermal-and structural behavior of the actuators is studied considering different beams dimensions (length and width and dc bias voltages from 0.5 to 2.5 V. For 2.5 V, the actuator of 550 µm length reaches a maximum temperature, displacement and electrical power of 115 °C, 10.3 µm and 6.3 mW, respectively. The designed actuation mechanism can be useful for MEMS mirrors of different sizes with potential application in endoscopic OCT systems that require low power consumption.

  18. Validation of a new adaptive deformable mirror concept

    NARCIS (Netherlands)

    Hamelinck, R.; Ellenbroek, R.; Rosielle, N.; Steinbuch, M.; Verhaegen, M.; Doelman, N.

    2008-01-01

    A new prototype adaptive deformable mirror for future AO-systems is presented that consists of a thin continuous membrane on which push-pull actuators impose out-of-plane displacements. Each actuator has ±10?m stroke, nanometer resolution and only mW’s heat dissipation. The mirror’s modular design

  19. Deformable mirrors : Design fundamentals for force actuation of continuous facesheets

    NARCIS (Netherlands)

    Ravensbergen, S.K.; Hamelinck, R.F.H.M.; Rosielle, P.C.J.N.; Steinbuch, M.

    2009-01-01

    Adaptive Optics is established as essential technology in current and future ground based (extremely) large telescopes to compensate for atmospheric turbulence. Deformable mirrors for astronomic purposes have a high number of actuators (> 10k), a relatively large stroke (> 10µm) on a small spacing

  20. Surface Slope Metrology on Deformable Soft X-ray Mirrors

    International Nuclear Information System (INIS)

    Yuan, Sheng; Yashchuk, Valeriy V.; Goldberg, Kenneth A.; Celestre, Rich; Church, Matthew; McKinney, Wayne R.; Morrison, Greg; Warwick, Tony

    2010-01-01

    We report on the current state of surface slope metrology on deformable mirrors for soft x-rays at the Advanced Light Source (ALS). While we are developing techniques for in situ at-wavelength tuning, we are refining methods of ex situ visible-light optical metrology to achieve sub-100-nrad accuracy. This paper reports on laboratory studies, measurements and tuning of a deformable test-KB mirror prior to its use. The test mirror was bent to a much different optical configuration than its original design, achieving a 0.38 micro-radian residual slope error. Modeling shows that in some cases, by including the image conjugate distance as an additional free parameter in the alignment, along with the two force couples, fourth-order tangential shape errors (the so-called bird shape) can be reduced or eliminated.

  1. Surface Slope Metrology on Deformable Soft X-ray Mirrors

    International Nuclear Information System (INIS)

    Yuan, S.; Yashchuk, V.V.; Goldberg, K.A.; Celestre, R.; Church, M.; McKinney, W.R.; Morrison, G.; Warwick, T.

    2009-01-01

    We report on the current state of surface slope metrology on deformable mirrors for soft x-rays at the Advanced Light Source (ALS). While we are developing techniques for in situ at-wavelength tuning, we are refining methods of ex situvisible-light optical metrology to achieve sub-100-nrad accuracy. This paper reports on laboratory studies, measurements and tuning of a deformable test-KB mirror prior to its use. The test mirror was bent to a much different optical configuration than its original design, achieving a 0.38 micro-radian residual slope error. Modeling shows that in some cases, by including the image conjugate distance as an additional free parameter in the alignment, along with the two force couples, fourth-order tangential shape errors (the so-called bird shape) can be reduced or eliminated.

  2. Scanning fiber microdisplay: design, implementation, and comparison to MEMS mirror-based scanning displays.

    Science.gov (United States)

    Khayatzadeh, Ramin; Civitci, Fehmi; Ferhanoglu, Onur; Urey, Hakan

    2018-03-05

    In this study, we propose a compact, lightweight scanning fiber microdisplay towards virtual and augmented reality applications. Our design that is tailored as a head-worn-display simply consists of a four-quadrant piezoelectric tube actuator through which a fiber optics cable is extended and actuated, and a reflective (or semi-reflective) ellipsoidal surface that relays the moving tip of the fiber onto the viewer's retina. The proposed display, offers significant advantages in terms of architectural simplicity, form-factor, fabrication complexity and cost over other fiber scanner and MEMS mirror counterparts towards practical realization. We demonstrate the display of various patterns with ∼VGA resolution and further provide analytical formulas for mechanical and optical constraints to compare the performance of the proposed scanning fiber microdisplay with that of MEMS mirror-based microdisplays. Also we discuss the road steps towards improving the performance of the proposed scanning fiber microdisplay to high-definition video formats (such as HD1440), which is beyond what has been achieved by MEMS mirror based laser scanning displays.

  3. Reducing the Surface Performance Requirements of a Primary Mirror by Adding a Deformable Mirror in its Optical Path

    Science.gov (United States)

    2015-12-01

    REQUIREMENTS OF A PRIMARY MIRROR BY ADDING A DEFORMABLE MIRROR IN ITS OPTICAL PATH by Ernesto R. Villalba December 2015 Thesis Advisor: Brij...TYPE AND DATES COVERED Master’s thesis 4. TITLE AND SUBTITLE REDUCING THE SURFACE PERFORMANCE REQUIREMENTS OF A PRIMARY MIRROR BY ADDING A...DEFORMABLE MIRROR IN ITS OPTICAL PATH 5. FUNDING NUMBERS 6. AUTHOR(S) Ernesto R. Villalba 7. PERFORMING ORGANIZATION NAME(S) AND ADDRESS(ES) Naval

  4. Enhanced Fabrication Processes Development for High Actuator Count Deformable Mirrors, Phase II

    Data.gov (United States)

    National Aeronautics and Space Administration — We propose to design and fabricate a MEMS micromirror array consisting of 1021 ultra-flat, close-packed hexagonal mirror elements, each capable of 6mrad of tip and...

  5. Picometer-Resolution MEMS Segmented DM Project

    Data.gov (United States)

    National Aeronautics and Space Administration — Microelectromechanical systems (MEMS) technology has the potential to create deformable mirrors (DM) with 10^4 actuators that have size, weight, and power...

  6. Application of MEMS Accelerometers and Gyroscopes in Fast Steering Mirror Control Systems

    Directory of Open Access Journals (Sweden)

    Jing Tian

    2016-03-01

    Full Text Available In a charge-coupled device (CCD-based fast steering mirror (FSM tracking control system, high control bandwidth is the most effective way to enhance the closed-loop performance. However, the control system usually suffers a great deal from mechanical resonances and time delays induced by the low sampling rate of CCDs. To meet the requirements of high precision and load restriction, fiber-optic gyroscopes (FOGs are usually used in traditional FSM tracking control systems. In recent years, the MEMS accelerometer and gyroscope are becoming smaller and lighter and their performance have improved gradually, so that they can be used in a fast steering mirror (FSM to realize the stabilization of the line-of-sight (LOS of the control system. Therefore, a tentative approach to implement a CCD-based FSM tracking control system, which uses MEMS accelerometers and gyroscopes as feedback components and contains an acceleration loop, a velocity loop and a position loop, is proposed. The disturbance suppression of the proposed method is the product of the error attenuation of the acceleration loop, the velocity loop and the position loop. Extensive experimental results show that the MEMS accelerometers and gyroscopes can act the similar role as the FOG with lower cost for stabilizing the LOS of the FSM tracking control system.

  7. Ultraflat Tip-Tilt-Piston MEMS Deformable Mirror, Phase II

    Data.gov (United States)

    National Aeronautics and Space Administration — This proposal describes a Phase II SBIR project to develop high-resolution, ultraflat micromirror array devices using advanced silicon surface micromachining...

  8. Enhanced Reliability MEMS Deformable Mirrors for Space Imaging Applications Project

    Data.gov (United States)

    National Aeronautics and Space Administration — The goal of this project is to develop and demonstrate a reliable, fault-tolerant wavefront control system that will fill a critical technology gap in NASA's vision...

  9. Modeling for deformable mirrors and the adaptive optics optimization program

    International Nuclear Information System (INIS)

    Henesian, M.A.; Haney, S.W.; Trenholme, J.B.; Thomas, M.

    1997-01-01

    We discuss aspects of adaptive optics optimization for large fusion laser systems such as the 192-arm National Ignition Facility (NIF) at LLNL. By way of example, we considered the discrete actuator deformable mirror and Hartmann sensor system used on the Beamlet laser. Beamlet is a single-aperture prototype of the 11-0-5 slab amplifier design for NIF, and so we expect similar optical distortion levels and deformable mirror correction requirements. We are now in the process of developing a numerically efficient object oriented C++ language implementation of our adaptive optics and wavefront sensor code, but this code is not yet operational. Results are based instead on the prototype algorithms, coded-up in an interpreted array processing computer language

  10. The implementation of laser speckle reduction based on MEMS two-dimensional scanning mirror

    Science.gov (United States)

    Wang, Tingting; Shen, Wenjiang; Wu, Shengli; Zhou, Peng; He, Jiahui; Yu, Huijun

    2016-10-01

    Laser speckle on the screen of laser display system is due to the strong coherence characteristic of laser. In order to eliminate the influence of the speckle on image quality, the method of laser speckle reduction based on MEMS two-dimensional scanning mirror is proposed in this paper. The experimental results show that the speckle contrast can be reduced to 3.7%, which meets the requirement of laser display. And this system could be used in laser display field and improve the display performance.

  11. Correction of image distortions in endoscopic optical coherence tomography based on two-axis scanning MEMS mirrors

    Science.gov (United States)

    Wang, Donglin; Liang, Peng; Samuelson, Sean; Jia, Hongzhi; Ma, Junshan; Xie, Huikai

    2013-01-01

    A two-axis scanning microelectromechanical (MEMS) mirror enables an optical coherence tomography (OCT) system to perform three-dimensional endoscopic imaging due to its fast scan speed and small size. However, the radial scan from the MEMS mirror causes various distortions in OCT images, namely spherical, fan-shaped and keystone distortions. In this paper, a new method is proposed to correct all of three distortions presented in OCT systems based on two-axis MEMS scanning mirrors. The spherical distortion is corrected first by directly manipulating the original spectral interferograms in the phase domain, followed by Fourier transform and three-dimensional geometrical transformation for correcting the other two types of distortions. OCT imaging experiments on a paper with square ink printed arrays and a glass tube filled with milk have been used to validate the proposed method. Distortions in OCT images of flat or curved surfaces can all be effectively removed. PMID:24156064

  12. The digital geometric phase technique applied to the deformation evaluation of MEMS devices

    International Nuclear Information System (INIS)

    Liu, Z W; Xie, H M; Gu, C Z; Meng, Y G

    2009-01-01

    Quantitative evaluation of the structure deformation of microfabricated electromechanical systems is of importance for the design and functional control of microsystems. In this investigation, a novel digital geometric phase technique was developed to meet the deformation evaluation requirement of microelectromechanical systems (MEMS). The technique is performed on the basis of regular artificial lattices, instead of a natural atom lattice. The regular artificial lattices with a pitch ranging from micrometer to nanometer will be directly fabricated on the measured surface of MEMS devices by using a focused ion beam (FIB). Phase information can be obtained from the Bragg filtered images after fast Fourier transform (FFT) and inverse fast Fourier transform (IFFT) of the scanning electronic microscope (SEM) images. Then the in-plane displacement field and the local strain field related to the phase information will be evaluated. The obtained results show that the technique can be well applied to deformation measurement with nanometer sensitivity and stiction force estimation of a MEMS device

  13. Multi-segment tapered optical mirror for MEMS LiDAR application

    Science.gov (United States)

    Abdelsalam, Mostafa; Sabry, Yasser; Erfan, Mazen; Khalil, Diaa

    2017-02-01

    In this work, we present a novel and simple optical solution for MEMS LiDARs. The idea is based on increasing the collection optics throughput by removing the MEMS mirror from the path of the collected light, while inserting a multi-segment tapered structure to collect the light from a wide angle. The tapered also converts the large size optical spot captured to a small area compatible with the requirement of low detector noise dimensions. The expected improvement in the collected power is analyzed versus the tapering angle of a single tapered structure. A multi-segment optical system, or multiple tapered structure arranged in parallel, is also introduced allowing for the optimization of the acceptance angle and the power improvement ratio. Using a 3-segment mirror, the expected improvement is about 15x with an acceptance angle of +/-30 degrees. The design of a single element taper section is fabricated using aluminum-coated acrylic and tested experimentally showing an improvement of about 7x in the coupled power through an angle of +/-10 degrees in good agreement with the theoretical expectations.

  14. X-ray beam-shaping via deformable mirrors: Analytical computation of the required mirror profile

    Energy Technology Data Exchange (ETDEWEB)

    Spiga, Daniele, E-mail: daniele.spiga@brera.inaf.it [INAF/Osservatorio Astronomico di Brera, Via E. Bianchi 46, I-23807, Merate (Italy); Raimondi, Lorenzo; Svetina, Cristian [Sincrotrone Trieste ScpA, S.S. 14 km 163.5 in Area Science Park, 34149 Trieste (Italy); Zangrando, Marco [Sincrotrone Trieste ScpA, S.S. 14 km 163.5 in Area Science Park, 34149 Trieste (Italy); IOM-CNR, S.S. 14 km 163.5 in Area Science Park, 34149 Trieste (Italy)

    2013-05-11

    X-ray mirrors with high focusing performances are in use in both mirror modules for X-ray telescopes and in synchrotron and FEL (Free Electron Laser) beamlines. A degradation of the focus sharpness arises in general from geometrical deformations and surface roughness, the former usually described by geometrical optics and the latter by physical optics. In general, technological developments are aimed at a very tight focusing, which requires the mirror profile to comply with the nominal shape as much as possible and to keep the roughness at a negligible level. However, a deliberate deformation of the mirror can be made to endow the focus with a desired size and distribution, via piezo actuators as done at the EIS-TIMEX beamline of FERMI@Elettra. The resulting profile can be characterized with a Long Trace Profilometer and correlated with the expected optical quality via a wavefront propagation code. However, if the roughness contribution can be neglected, the computation can be performed via a ray-tracing routine, and, under opportune assumptions, the focal spot profile (the Point Spread Function, PSF) can even be predicted analytically. The advantage of this approach is that the analytical relation can be reversed; i.e., from the desired PSF the required mirror profile can be computed easily, thereby avoiding the use of complex and time-consuming numerical codes. The method can also be suited in the case of spatially inhomogeneous beam intensities, as commonly experienced at synchrotrons and FELs. In this work we expose the analytical method and the application to the beam shaping problem.

  15. X-ray beam-shaping via deformable mirrors: Analytical computation of the required mirror profile

    International Nuclear Information System (INIS)

    Spiga, Daniele; Raimondi, Lorenzo; Svetina, Cristian; Zangrando, Marco

    2013-01-01

    X-ray mirrors with high focusing performances are in use in both mirror modules for X-ray telescopes and in synchrotron and FEL (Free Electron Laser) beamlines. A degradation of the focus sharpness arises in general from geometrical deformations and surface roughness, the former usually described by geometrical optics and the latter by physical optics. In general, technological developments are aimed at a very tight focusing, which requires the mirror profile to comply with the nominal shape as much as possible and to keep the roughness at a negligible level. However, a deliberate deformation of the mirror can be made to endow the focus with a desired size and distribution, via piezo actuators as done at the EIS-TIMEX beamline of FERMI@Elettra. The resulting profile can be characterized with a Long Trace Profilometer and correlated with the expected optical quality via a wavefront propagation code. However, if the roughness contribution can be neglected, the computation can be performed via a ray-tracing routine, and, under opportune assumptions, the focal spot profile (the Point Spread Function, PSF) can even be predicted analytically. The advantage of this approach is that the analytical relation can be reversed; i.e., from the desired PSF the required mirror profile can be computed easily, thereby avoiding the use of complex and time-consuming numerical codes. The method can also be suited in the case of spatially inhomogeneous beam intensities, as commonly experienced at synchrotrons and FELs. In this work we expose the analytical method and the application to the beam shaping problem

  16. Improved DMD configurations for image correlation. [deformable mirror devices

    Science.gov (United States)

    Florence, James M.; Lin, Tsen-Hwang; Wu, Wen-Rong; Juday, Richard D.

    1990-01-01

    Two novel deformable mirror structures have been developed for spatial light modulators: an 'AM torsion beam' and a 'phase-mostly single-quadrant cantilever' beam. Both devices are well-suited to optical correlator input and filtering functions. Which the optical modulation characteristic of the torsion-beam modulator is essential amplitude only, which is well suited for use as the input modulator of the optical correlator, the characteristic of the one-quadrant modulator is a phase-mostly modulation whose amplitude changes are coupled to the phase changes; this renders it operable in the Fourier plane of the optical correlator as the filtering device.

  17. A Virtual Pivot Point MEMS Actuator with Externally Mounted Mirror: Design, Fabrication and Characterization

    Directory of Open Access Journals (Sweden)

    T. M. Fahim AMIN

    2014-12-01

    Full Text Available In this paper, the design, fabrication, and characterization of a virtual pivot point micro electromechanical systems (MEMS electrostatic actuator with externally mounted mirror is presented. The point of rotation of the movable arm of the actuator is distant from the physical actuator. This is a requirement for certain applications, such as an external cavity laser in Littman configuration. A maximum rotational radius of 5 mm from the virtual pivot point was achieved. A detailed analytical analysis for the displacement of the structure is presented. The dynamic characterization of the device with a finite element analysis simulation shows that the resonance frequency of the in-plane rotational mode is well separated from that of the out-of-plane bending mode, confirming high in-plane stability. The devices were fabricated on a silicon-on-insulator wafer with device layer thickness of 100 µm. Thin mirrors were fabricated by dicing a 100 µm thick silicon wafer. A resonance frequency of about 5.9 ´ 102 Hz for the maximum sized mounted mirror (1.7 mm ´ 100 µm ´ 1.0 mm was determined by optical characterization.

  18. Picometer-Resolution MEMS Segmented DM, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — Microelectromechanical systems (MEMS) technology has the potential to create deformable mirrors (DM) with 10^4 actuators that have size, weight, and power...

  19. 1015 PTT Segment MEMS DM Development, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — Microelectromechanical systems (MEMS) technology has the potential to create deformable mirrors (DM) with more than 10^4 actuators with size, weight, and power...

  20. Picometer-Resolution MEMS Segmented DM, Phase II

    Data.gov (United States)

    National Aeronautics and Space Administration — Microelectromechanical systems (MEMS) technology has the potential to create deformable mirrors (DM) with 10^4 actuators that have size, weight, and power...

  1. Piezoelectric deformable mirror technologies for astronomy at IOE, CAS

    Science.gov (United States)

    Guan, Chunlin; Fan, Xinlong; Zhang, Xiaojun; Zhou, Hong; Mu, Jinbo; Xue, Lixia; Wei, Kai; Xian, Hao; Rao, Changhui; Zhang, Yudong; Ling, Ning

    2014-07-01

    Institute of Optics & Electronics (IOE), Chinese Academy of Sciences (CAS) has more than 30 years' experience on piezoelectric deformable mirror (DM) technologies research and developing since early 1980s. Several DMs of IOE have been used in many different application systems. A brief history of piezoelectric DMs development in IOE and several recently achievements, and the main characters, performance and test results of the DMs for astronomy will be presented in this paper. 1) High-order DM. DM prototype with 913-element for 4m telescope has been fabricated and tested in laboratory. 2) Adaptive Secondary Mirror (ASM). A 73-element ASM prototype with 12 microns stroke for 1.8m telescope has been fabricated. It will be installed onto the 1.8m telescope with a compact adaptive optics (AO) system. 3) Small spacing DM. A 6mm spacing 127-element DM based on the same construction with the High-order DM has been used in AO system of 1m New Vacuum Solar Telescope (NVST) in Yunnan Observatories. Higher density (3mm spacing) DM based on a novel construction has being developed. In 2012, the novel DM prototype with 100-element was fabricated and tested carefully in laboratory. Beside, a 6mm spacing 151-element DM based on the novel construction has being fabricated for the solar AO system.

  2. Optical Design of Adaptive Optics Confocal Scanning Laser Ophthalmoscope with Two Deformable Mirrors.

    Science.gov (United States)

    Yang, Jinsheng; Wang, Yuanyuan; Rao, Xuejun; Wei, Ling; Li, Xiqi; He, Yi

    2017-01-01

    We describe the optical design of a confocal scanning laser ophthalmoscope with two deformable mirrors. Spherical mirrors are used for pupil relay. Defocus aberration of the human eye is corrected by a Badal focusing structure and astigmatism aberration is corrected by a deformable mirror. The main optical system achieves a diffraction-limited performance through the entire scanning field (6 mm pupil, 3 degrees on pupil plane). The performance of the optical system, with correction of defocus and astigmatism, is also evaluated.

  3. Design of control system for piezoelectric deformable mirror based on fuzzy self-adaptive PID control

    Science.gov (United States)

    Xiao, Nan; Gao, Wei; Song, Zongxi

    2017-10-01

    With the rapid development of adaptive optics technology, it is widely used in the fields of astronomical telescope imaging, laser beam shaping, optical communication and so on. As the key component of adaptive optics systems, the deformable mirror plays a role in wavefront correction. In order to achieve the high speed and high precision of deformable mirror system tracking control, it is necessary to find out the influence of each link on the system performance to model the system and design the controller. This paper presents a method about the piezoelectric deformable mirror driving control system.

  4. Instantaneous phase mapping deflectometry for dynamic deformable mirror characterization

    Science.gov (United States)

    Trumper, Isaac; Choi, Heejoo

    2017-09-01

    We present an instantaneous phase mapping deflectometry (PMD) system in the context of measuring a continuous surface deformable mirror (DM). Deflectometry has a high dynamic range, enabling the full range of surfaces generated by the DM to be measured. The recent development of an instantaneous PMD system leverages the simple setup of the PMD system to measure dynamic objects with accuracy similar to an interferometer. To demonstrate the capabilities of this technology, we perform a linearity measurement of the actuator motion in a continuous surface DM, which is critical for closed loop control in adaptive optics applications. We measure the entire set of actuators across the DM as they traverse their full range of motion with a Shack-Hartman wavefront sensor, thereby obtaining the influence function. Given the influence function of each actuator, the DM can produce specific Zernike terms on its surface. We then measure the linearity of the Zernike modes available in the DM software using the instantaneous PMD system. By obtaining the relationship between modes, we can more accurately generate surface profiles composed of Zernike terms. This ability is useful for other dynamic freeform metrology applications that utilize the DM as a null component.

  5. CubeSat Deformable Mirror Demonstration mission (DeMi)

    Science.gov (United States)

    Cahoy, K.; Marinan, A.; Kerr, C.; Novak, B.; Webber, M.; Kasdin, N. J.

    The high contrast requirement of 1010 needed to directly image an Earth-like exoplanet around a sun-like star at optical wavelengths requires space telescopes equipped with coronagraphs and wavefront control systems. Coronagraphs are needed to block the parent star's light and improve the ability of the system to detect photons that have reflected off of the exoplanet toward the observer. Wavefront control systems are needed to correct image plane aberrations and speckles caused by imperfections, thermal distortions, and diffraction in the telescope and optics that would otherwise corrupt the wavefront and ruin the desired contrast. The two key elements of wavefront control systems are (1) a way to detect the wavefront distortions (a wavefront sensor) and (2) a way to correct the distortions before the image plane (such as deformable mirrors, or DMs). In this paper, we investigate a compact and inexpensive CubeSat-based wavefront control testbed that can be used as a technology development precursor toward a larger mission.

  6. MEMS AO for Planet Finding

    Science.gov (United States)

    Rao, Shanti; Wallace, J. Kent; Shao, Mike; Schmidtlin, Edouard; Levine, B. Martin; Samuele, Rocco; Lane, Benjamin; Chakrabarti, Supriya; Cook, Timothy; Hicks, Brian; hide

    2008-01-01

    This slide presentation reviews a method for planet finding using microelectromechanical systems (MEMS) Adaptive Optics (AO). The use of a deformable mirror (DM) is described as a part of the instrument that was designed with a nulling interferometer. The strategy that is used is described in detail.

  7. High-dynamic range image projection using an auxiliary MEMS mirror array.

    Science.gov (United States)

    Hoskinson, Reynald; Stoeber, Boris

    2008-05-12

    We introduce a new concept to improve the contrast and peak brightness of conventional data projectors. Our method provides a non-homogenous light source by dynamically directing fractions of the light from the projector lamp before it reaches the display mechanism. This will supply more light to the areas that need it most, at the expense of the darker parts of the image. In effect, this method will produce a low resolution version of the image onto the image-forming element. To manipulate the light in this manner, we propose using an intermediate array of microelectromechanical system (MEMS) mirrors. By directing the light away from the dark parts earlier in the display chain, the amount of light that needs to be blocked will be reduced, thus decreasing the black level of the final image. Moreover, the ability to dynamically allocate more light to the bright parts of the image will allow for peak brightness higher than the average maximum brightness of display.

  8. Quantitative thermal imaging using single-pixel Si APD and MEMS mirror.

    Science.gov (United States)

    Hobbs, Matthew J; Grainger, Matthew P; Zhu, Chengxi; Tan, Chee Hing; Willmott, Jonathan R

    2018-02-05

    Accurate quantitative temperature measurements are difficult to achieve using focal-plane array sensors. This is due to reflections inside the instrument and the difficulty of calibrating a matrix of pixels as identical radiation thermometers. Size-of-source effect (SSE), which is the dependence of an infrared temperature measurement on the area surrounding the target area, is a major contributor to this problem and cannot be reduced using glare stops. Measurements are affected by power received from outside the field-of-view (FOV), leading to increased measurement uncertainty. In this work, we present a micromechanical systems (MEMS) mirror based scanning thermal imaging camera with reduced measurement uncertainty compared to focal-plane array based systems. We demonstrate our flexible imaging approach using a Si avalanche photodiode (APD), which utilises high internal gain to enable the measurement of lower target temperatures with an effective wavelength of 1 µm and compare results with a Si photodiode. We compare measurements from our APD thermal imaging instrument against a commercial bolometer based focal-plane array camera. Our scanning approach results in a reduction in SSE related temperature error by 66 °C for the measurement of a spatially uniform 800 °C target when the target aperture diameter is increased from 10 to 20 mm. We also find that our APD instrument is capable of measuring target temperatures below 700 °C, over these near infrared wavelengths, with D* related measurement uncertainty of ± 0.5 °C.

  9. Single Crystal Piezoelectric Deformable Mirrors with High Actuator Density and Large Stroke, Phase II

    Data.gov (United States)

    National Aeronautics and Space Administration — Single crystal piezoelectric deformable mirrors with high actuator density, fine pitch, large stroke and no floating wires will be developed for future NASA science...

  10. Development of Organic FET (OFET)-Based Flexible Integrated Controller for Deformable Mirrors Project

    Data.gov (United States)

    National Aeronautics and Space Administration — The goal is to complete process development to make OFET’s on flexible substrates compatible with ultra-lightweight deformable mirrors and to demonstrate...

  11. Enhanced Fabrication Processes Development for High Actuator Count Deformable Mirrors, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — It is proposed to advance manufacturing science and technology to improve yield and optical surface figure in high actuator count, high-resolution deformable mirrors...

  12. Development of a Low Mass, Low Power Deformable Mirror with Integrated Drive Electronics Project

    Data.gov (United States)

    National Aeronautics and Space Administration — "Deformable mirrors (DM) are key to achieving high contrast for any mission to image expolanets. Currently Northrup Grumman Xinetics is the only viable source...

  13. Design of an optimized adaptive optics system with a photo-controlled deformable mirror

    Czech Academy of Sciences Publication Activity Database

    Pilař, Jan; Bonora, Stefano; Lucianetti, Antonio; Jelínková, H.; Mocek, Tomáš

    2016-01-01

    Roč. 28, č. 13 (2016), s. 1422-1425 ISSN 1041-1135 Institutional support: RVO:68378271 Keywords : adaptive optics * closed loop systems * deformable mirror Subject RIV: BH - Optics, Masers, Lasers Impact factor: 2.375, year: 2016

  14. Single Crystal Bimorph Array (SCBA) Driven Deformable Mirror (DM), Phase II

    Data.gov (United States)

    National Aeronautics and Space Administration — This Small Business Innovation Research (SBIR) Phase II project will research a novel deformable mirror design for NASA adaptive optics telescope applications. The...

  15. Compact Low-Power Driver for Deformable Mirror Systems, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — Boston Micromachines Corporation (BMC), a leading developer of unique, high-resolution micromachined deformable mirrors (DMs), will develop a compact, low-power,...

  16. Topography improvements in MEMS DMs for high-contrast, high-resolution imaging, Phase II

    Data.gov (United States)

    National Aeronautics and Space Administration — We propose to develop a 3064 actuator, continuous facesheet MEMS deformable mirror using a modified fabrication process that will eliminate mid-spatial frequency...

  17. Fabrication Process and Electronics Development for Scaling Segmented MEMS DMs, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — Microelectromechanical systems (MEMS) technology has the potential to create deformable mirrors (DM) with more than 10^4 actuators that have size, weight, and power...

  18. Fabrication Process and Electronics Development for Scaling Segmented MEMS DMs, Phase II

    Data.gov (United States)

    National Aeronautics and Space Administration — Microelectromechanical systems (MEMS) technology has the potential to create deformable mirrors (DM) with more than 10^4 actuators that have size, weight, and power...

  19. Fabrication Process and Electronics Development for Scaling Segmented MEMS DMs Project

    Data.gov (United States)

    National Aeronautics and Space Administration — Microelectromechanical systems (MEMS) technology has the potential to create deformable mirrors (DM) with more than 10^4 actuators that have size, weight, and power...

  20. Deformable mirrors for intra-cavity use in high-power thin-disk lasers.

    Science.gov (United States)

    Piehler, Stefan; Dietrich, Tom; Wittmüss, Philipp; Sawodny, Oliver; Ahmed, Marwan Abdou; Graf, Thomas

    2017-02-20

    We present deformable mirrors for the intra-cavity use in high-power thin-disk laser resonators. The refractive power of these mirrors is continuously adaptable from -0.7 m-1 to 0.3 m-1, corresponding to radii of curvature ranging between 2.86 m (convex) and 6.67 m (concave). The optimized shape of the mirror membrane enables a very low peak-to-valley deviation from a paraboloid deformation over a large area. With the optical performance of our mirrors being equal to that of standard HR mirrors, we were able to demonstrate the tuning of the beam quality of a thin-disk laser in a range of M2 = 3 to M2 = 1 during laser operation at output powers as high as 1.1 kW.

  1. Hard X-ray nanofocusing using adaptive focusing optics based on piezoelectric deformable mirrors.

    Science.gov (United States)

    Goto, Takumi; Nakamori, Hiroki; Kimura, Takashi; Sano, Yasuhisa; Kohmura, Yoshiki; Tamasaku, Kenji; Yabashi, Makina; Ishikawa, Tetsuya; Yamauchi, Kazuto; Matsuyama, Satoshi

    2015-04-01

    An adaptive Kirkpatrick-Baez mirror focusing optics based on piezoelectric deformable mirrors was constructed at SPring-8 and its focusing performance characteristics were demonstrated. By adjusting the voltages applied to the deformable mirrors, the shape errors (compared to a target elliptical shape) were finely corrected on the basis of the mirror shape determined using the pencil-beam method, which is a type of at-wavelength figure metrology in the X-ray region. The mirror shapes were controlled with a peak-to-valley height accuracy of 2.5 nm. A focused beam with an intensity profile having a full width at half maximum of 110 × 65 nm (V × H) was achieved at an X-ray energy of 10 keV.

  2. Fabrication of thin vertical mirrors through plasma etch and KOH:IPA polishing for integration into MEMS electrostatic actuators

    Science.gov (United States)

    Huda, M. Q.; Amin, T. M. F.; Ning, Y.; McKinnon, G.; Tulip, J.; Jäger, W.

    2013-03-01

    We developed a process for the fabrication of thin vertical mirrors as integrated structures of MEMS electrostatic actuators. The mirrors can be implemented as a vertical extension of the actuator sidewall, or can be positioned at any movable part of the actuator. The process involves the fabrication of a mesa structure on the handle layer of a silicon-oninsulator (SOI) wafer through deep reactive ion etching (DRIE). The etch/passivation cycles of the DRIE process were optimized to achieve vertical etch profiles with a depth of up to 200 μm with an aspect ratio of 10:1. The DRIE process introduced typical etch scallops with peak-to-valley and rms roughnesses on the order of 100 nm and 30 nm, respectively. A mask layer was used to pattern a 2.1 μm sacrificial oxide layer for the mesa structure. A second mask layer allowed us to define a large etch cavity for handle layer back-etch. The DRIE etched mesa structure was then etched with diluted potassium hydroxide (KOH) in isopropyl alcohol (IPA). Temperature and etch concentration were optimized for the removal of etch scallops without the formation of etch facets. The etch scallops were almost completely removed and mirror quality surfaces were achieved. The developed mesa structures are suitable for integration into actuators that are patterned in the device layer. A third masking layer, aligned through infrared camera, was used to position the thin vertical mirror at the actuator sidewall. The process provides design flexibility in integrating vertical mirrors of adjustable dimensions to movable elements of MEMS structures.

  3. MEMS Inertial Sensors-Based Multi-Loop Control Enhanced by Disturbance Observation and Compensation for Fast Steering Mirror System.

    Science.gov (United States)

    Deng, Chao; Mao, Yao; Ren, Ge

    2016-11-15

    In this paper, an approach to improve the disturbance suppression performance of a fast steering mirror (FSM) tracking control system based on a charge-coupled device (CCD) and micro-electro-mechanical system (MEMS) inertial sensors is proposed. The disturbance observation and compensation (DOC) control method is recommended to enhance the classical multi-loop feedback control (MFC) for line-of-sight (LOS) stabilization in the FSM system. MEMS accelerometers and gyroscopes have been used in the FSM system tentatively to implement MFC instead of fiber-optic gyroscopes (FOG) because of its smaller, lighter, cheaper features and gradually improved performance. However, the stabilization performance of FSM is still suffering a large number of mechanical resonances and time delay induced by a low CCD sampling rate, which causes insufficient error attenuation when suffering uncertain disturbances. Thus, in order to make further improvements on the stabilization performance, a cascaded MFC enhanced by DOC method is proposed. The sensitivity of this method shows the significant improvement of the conventional MFC system. Simultaneously, the analysis of stabilization accuracy is also presented. A series of comparative experimental results demonstrate the disturbance suppression performance of the FSM control system based on the MEMS inertial sensors can be effectively improved by the proposed approach.

  4. Hybrid Electrostatic/Flextensional Deformable Membrane Mirror for Lightweight, Large Aperture and Cryogenic Space Telescopes, Phase II

    Data.gov (United States)

    National Aeronautics and Space Administration — TRS Technologies proposes innovative hybrid electrostatic/flextensional membrane deformable mirror capable of large amplitude aberration correction for large...

  5. Characterization of low-mass deformable mirrors and ASIC drivers for high-contrast imaging

    Science.gov (United States)

    Mejia Prada, Camilo; Yao, Li; Wu, Yuqian; Roberts, Lewis C.; Shelton, Chris; Wu, Xingtao

    2017-09-01

    The development of compact, high performance Deformable Mirrors (DMs) is one of the most important technological challenges for high-contrast imaging on space missions. Microscale Inc. has fabricated and characterized piezoelectric stack actuator deformable mirrors (PZT-DMs) and Application-Specific Integrated Circuit (ASIC) drivers for direct integration. The DM-ASIC system is designed to eliminate almost all cables, enabling a very compact optical system with low mass and low power consumption. We report on the optical tests used to evaluate the performance of the DM and ASIC units. We also compare the results to the requirements for space-based high-contrast imaging of exoplanets.

  6. Driver ASICs for Advanced Deformable Mirrors, Phase II

    Data.gov (United States)

    National Aeronautics and Space Administration — The overall goal of the SBIR program is to develop a new Application Specified Integrated Circuit (ASIC) driver to be used in driver electronics of a deformable...

  7. Modelling and optimization of a deformable mirror for laser beam control

    CSIR Research Space (South Africa)

    Loveday, PW

    2008-03-01

    Full Text Available of orthogonal functions. The challenge is to design a device that can represent selected polynomials as accurately as possible with specified amplitude. Numerical modelling is required to predict the deformation shapes that can be achieved by a unimorph mirror...

  8. Single-plane multiple speckle pattern phase retrieval using a deformable mirror

    DEFF Research Database (Denmark)

    Almoro, Percival F.; Glückstad, Jesper; Hanson, Steen Grüner

    2010-01-01

    A design for a single-plane multiple speckle pattern phase retrieval technique using a deformable mirror (DM) is analyzed within the formalism of complex ABCD-matrices, facilitating its use in conjunction with dynamic wavefronts. The variable focal length DM positioned at a Fourier plane of a lens...

  9. Study of a wide-aperture combined deformable mirror for high-power pulsed phosphate glass lasers

    Energy Technology Data Exchange (ETDEWEB)

    Samarkin, V V; Aleksandrov, A G; Romanov, P N; Rukosuev, A L; Kudryashov, A V [Moscow State University of Mechanical Engineering, Moscow (Russian Federation); Jitsuno, T [Institute of Laser Engineering, Osaka University, 2-6 Yamada-oka, Suita, Osaka 565-0871 (Japan)

    2015-12-31

    A deformable mirror with the size of 410 × 468 mm controlled by bimorph piezoceramic plates and multilayer piezo stacks is developed. The response functions of individual actuators and the measurements of the flatness of the deformable mirror surface are presented. The study of mirrors with an interferometer and a wavefront sensor has shown that it is possible to improve the surface flatness down to a residual roughness of 0.033 μm (RMS). The possibility of correction of beam aberrations in an ultra-high-power laser using the created bimorph mirror is demonstrated. (letters)

  10. Mirroring

    DEFF Research Database (Denmark)

    Wegener, Charlotte; Wegener, Gregers

    2016-01-01

    and metaphorical value of mirroring for creativity theory across two different research fields — neuroscience and learning. We engage in a mutual (possibly creative) exploration of mirroring from ‘mirror neurons’ to mirroring in social learning theory. One of the most fascinating aspects of mirroring...... as a neurobiological and as a learning phenomenon is that it points to the embodied and unconscious aspects of social interaction. Thus, mirroring should not be reduced to the non-creative, mechanical repetition of the original, outstanding creativity. To mirror is a human capability built into our capacity to create...

  11. Magnetic Fluid Deformable Mirror with a Two-Layer Layout of Actuators †

    Directory of Open Access Journals (Sweden)

    Zhizheng Wu

    2017-03-01

    Full Text Available In this paper, a new type of magnetic fluid deformable mirror (MFDM with a two-layer layout of actuators is proposed to improve the correction performance for full-order aberrations with a high spatial resolution. The shape of the magnetic fluid surface is controlled by the combined magnetic field generated by the Maxwell coil and the two-layer array of miniature coils. The upper-layer actuators which have a small size and high density are used to compensate for small-amplitude high-order aberrations and the lower-layer actuators which have a big size and low density are used to correct large-amplitude low-order aberrations. The analytical model of this deformable mirror is established and the aberration correction performance is verified by the experimental results. As a new kind of wavefront corrector, the MFDM has major advantages such as large stroke, low cost, and easy scalability and fabrication.

  12. A 1-metre Ni coated CFRP demonstrator for large deformable mirrors

    Science.gov (United States)

    Thompson, Samantha J.; Doel, Peter; Brooks, David; Strangwood, Martin

    We present results from our current project to develop an alternative substrate for large deformable mirrors, particularly with the European Extremely Large Telescope (E-ELT) in mind. Our mirror substrate consists of a carbon-fibre reinforced polymer (CFRP) core encapsulated in a thick (50µm) coating of nickel; the coating entirely covers the CFRP front, back and edges. The benefits of CFRP are: that it has high tensile strength, making it exceptionally resistant to breakage and able to withstand high inter-actuator forces; that it can be fabricated in large sections, allowing the production of a 2.6 m monolithic mirror, simplifying system control and eliminating additional diffraction/scattering introduced by segmented mirror systems; its low density (end of summer this year (2009) we aim to have constructed a 19 cm diameter fully actuated (37 piezo-stack actuators on a 29 mm triangular grid) prototype and a 1.0 m diameter substrate mounted on a static set of points to demonstrate the scalability of the technology. We discuss the processes involved in forming a Ni-CFRP mirror, the results obtained so far and a current status update.

  13. Swept source optical coherence tomography Gabor fusion splicing technique for microscopy of thick samples using a deformable mirror.

    Science.gov (United States)

    Costa, Christopher; Bradu, Adrian; Rogers, John; Phelan, Pauline; Podoleanu, Adrian

    2015-01-01

    We present a swept source optical coherence tomography (OCT) system at 1060 nm equipped with a wavefront sensor at 830 nm and a deformable mirror in a closed-loop adaptive optics (AO) system. Due to the AO correction, the confocal profile of the interface optics becomes narrower than the OCT axial range, restricting the part of the B-scan (cross section) with good contrast. By actuating on the deformable mirror, the depth of the focus is changed and the system is used to demonstrate Gabor filtering in order to produce B-scan OCT images with enhanced sensitivity throughout the axial range from a Drosophila larvae. The focus adjustment is achieved by manipulating the curvature of the deformable mirror between two user-defined limits. Particularities of controlling the focus for Gabor filtering using the deformable mirror are presented.

  14. Evolution of MEMS scanning mirrors for laser projection in compact consumer electronics

    Science.gov (United States)

    Tauscher, Jason; Davis, Wyatt O.; Brown, Dean; Ellis, Matt; Ma, Yunfei; Sherwood, Michael E.; Bowman, David; Helsel, Mark P.; Lee, Sung; Coy, John Wyatt

    2010-02-01

    The applicability of MOEMS scanning mirrors towards the creation of "flying spot" scanned laser displays is well established. The extension of this concept towards compact embedded pico-projectors has required an evolution of scanners and packaging to accommodate the needs of the consumer electronics space. This paper describes the progression of the biaxial MOEMS scanning mirrors developed by Microvision over recent years. Various aspects of the individual designs are compared. Early devices used a combination of magnetic quasistatic actuation and resonant electrostatic operation in an evacuated atmosphere to create a projection engine for retinal scanned displays. Subsequent designs realized the elimination of both the high voltage electrostatic drive and the vacuum package, and a simplification of the actuation scheme through proprietary technical advances. Additional advances have doubled the scan angle capability and greatly miniaturized the MOEMS component while not incurring significant increase in power consumption, making it an excellent fit for the consumer pico-projector application. The simplicity of the scanned laser-based pico-projector optical design enables high resolution and a large effective image size in a thin projection engine, all of which become critical both to the viability of the technology and adoption by consumers. Microvision's first scanned laser pico-projector is built around a MOEMS scanning mirror capable of projecting 16:9 aspect ratio, WVGA display within a 6.6 mm high package. Further evolution on this path promises continued improvement in resolution, size, and power.

  15. Some studies on the deformation of the membrane in an RF MEMS switch

    NARCIS (Netherlands)

    Ambati, Vijaya Raghav; Asheim, Andreas; van den Berg, Jan Bouwe; van Gennip, Yves; Gerasimov, Tymofiy; Hlod, Andriy; Planqué, Bob; van der Schans, Martin; van der Stelt, Sjors; Vargas Rivera, Michelangelo; Vondenhoff, Erwin; Bokhove, Onno; Hurink, Johann; Meinsma, Gjerrit; Stolk, Chris; Vellekoop, Michel

    2008-01-01

    Radio Frequency (RF) switches of Micro Electro Mechanical Systems (MEMS) are appealing to the mobile industry because of their energy efficiency and ability to accommodate more frequency bands. However, the electromechanical coupling of the electrical circuit to the mechanical components in RF MEMS

  16. Generation of a ring-focus by the use of a deformable mirror

    Energy Technology Data Exchange (ETDEWEB)

    Ziegler, Tim; Schramm, Ulrich [Helmholtz-Zentrum Dresden-Rossendorf (HZDR), Dresden (Germany); Technische Universitaet Dresden (Germany); Zeil, Karl [Helmholtz-Zentrum Dresden-Rossendorf (HZDR), Dresden (Germany)

    2016-07-01

    The target-normal-sheath-acceleration (TNSA) is a very promising way to accelerate protons by relativistic laser-plasma interaction. A central issue is still to increase the energy of the accelerated protons and to reduce their divergence. Therefore one approach is to vary the intensity distribution of the incoming laser-beam and by that the electron sheath on the rear-side which accelerates the protons. A ring-shaped intensity distribution promises an improvement for both features, so a deeper understanding how to generate and control such a distribution is required. The use of a deformable mirror is one method to shape the focal intensity distribution of an intense laser-beam in such a way. In order to get the desired intensity distribution in the focal plane it is necessary to do numerical simulations to get the appropriated shape of the deformable mirror. The mirror itself comes up with some constraints which must be taken into account as well and require a special adjustment. The results of the simulations and whether the theoretical results are technically feasible will be presented. The experimental investigations using a copropagating alignment beam and a closed loop adaptive optics were performed at the Draco Laser facility of the Helmholtz-Zentrum Dresden-Rossendorf.

  17. A Novel Microprocessor-Controlled High-Voltage Driver for Deformable Mirrors

    Science.gov (United States)

    Heuck, H.-M.; Buske, I.; Buschmann, U.; Krause, H.; Wittrock, U.

    Genetic algorithms have found widespread use in adaptive optics. One important advantage compared to the matrix inversion method is that it is not necessary to measure the wavefront of the optical beam on which the deformable mirror acts. Instead, any signal, that is monotonic increasing with the quality of the desired wavefront, is sufficient as a feedback signal. Often, this signal derives from a power-in-the-bucket measurement in the far-field of the beam. In coherent control of chemical reactions with temporally shaped femtosecond laser pulses the signal derives from the rate at which the desired chemical is produced. In our adaptive optics experiments we use micro-machined silicon membrane mirrors with up to 59 electrostatic actuators. We have developed a microprocessor-controlled highvoltage driver for up to 60 channels because we could not find a suitable driver on the market. The driver is a fully self-contained unit that only needs input power and communicates with a personal computer via a USB interface. It is especially suited for controlling adaptive mirrors with a genetic algorithm. The driver can store up to 100 voltage patterns, apply them sequentially to the mirror, store up to 4 feedback signals for each voltage pattern, and relay these feedback signals back to the host computer. We will discuss performance issues and tradeoffs like speed, bit resolution, and number of electrodes in our presentation.

  18. MEMS scanner mirror based system for retina scanning and in eye projection

    Science.gov (United States)

    Woittennek, Franziska; Knobbe, Jens; Pügner, Tino; Dallmann, Hans-Georg; Schelinski, Uwe; Grüger, Heinrich

    2015-02-01

    Many applications could benefit from miniaturized systems to scan blood vessels behind the retina in the human eye, so called "retina scanning". This reaches from access control to sophisticated security applications and medical devices. High volume systems for consumer applications require low cost and a user friendly operation. For example this includes no need for removal of glasses and self-adjustment, in turn guidance of focus and point of attraction by simultaneous projection for the user. A new system has been designed based on the well-known resonantly driven 2-d scanner mirror of Fraunhofer IPMS. A combined NIR and VIS laser system illuminates the eye through an eye piece designed for an operating distance allowing the use of glasses and granting sufficient field of view. This usability feature was considered to be more important than highest miniaturization. The modulated VIS laser facilitates the projection of an image directly onto the retina. The backscattered light from the continuous NIR laser contains the information of the blood vessels and is detected by a highly sensitive photo diode. A demonstrational setup has been realized including readout and driving electronics. The laser power was adjusted to an eye-secure level. Additional security features were integrated. Test measurements revealed promising results. In a first demonstration application the detection of biometric pattern of the blood vessels was evaluated for issues authentication in.

  19. Modeling of a Micro-Electronic Mechanical Systems (MEMS) Deformable Mirror for Simulation and Characterization

    Science.gov (United States)

    2016-09-01

    control and shape the wavefront is ideal for laser applications . Atmospheric distortions, thermals, and differences in environments between the laser ... applications include fiber optic cables for long distance data transfer and fast tactical communications such as long-distance laser communication systems...CONTENTS I.  INTRODUCTION ..................................................................................................1  A.  BACKGROUND

  20. Speckle reduction using deformable mirrors with diffusers in a laser pico-projector.

    Science.gov (United States)

    Chen, Hsuan-An; Pan, Jui-Wen; Yang, Zu-Po

    2017-07-24

    We propose a design for speckle reduction in a laser pico-projector adopting diffusers and deformable mirrors. This research focuses on speckle noise suppression by changing the angle of divergence of the diffuser. Moreover, the speckle contrast value can be further reduced by the addition of a deformable mirror. The speckle reduction ability obtained using diffusers with different divergence angles is compared. Three types of diffuser designs are compared in the experiments. For Type 1 which uses a circular symmetric diffuser the speckle contrast value can be decreased to 0.0264. For Type 2, the speckle contrast value can be reduced to 0.0267 because of the inclusion of an elliptical distribution diffuser. With Type 3 which includes a combination of the circular distribution diffuser and elliptical distribution diffuser, the speckle contrast value can be reduced to 0.0236. For all three types, the speckle contrast value is lower than 0.05. Under this speckle value, the speckle phenomenon is invisible to the human eye.

  1. MEMS and the direct detection of exoplanets

    Science.gov (United States)

    Thomas, Sandrine J.; Macintosh, Bruce; Belikov, Ruslan

    2014-03-01

    Deformable mirrors, and particularly MEMS, are crucial components for the direct imaging of exoplanets for both ground-based and space-based instruments. Without deformable mirrors, coronagraphs are incapable of reaching contrasts required to image Jupiter-like planets. The system performance is limited by image quality degradation resulting from wavefront error introduced from multiple effects including: atmospheric turbulence, static aberrations in the system, non-common-path aberrations, all of which vary with time. Correcting for these effects requires a deformable mirror with fast response and numerous actuators having moderate stroke. Not only do MEMS devices fulfill this requirement but their compactness permits their application in numerous space- and ground-based instruments, which are often volume- and mass-limited. In this paper, I will briefly explain how coronagraphs work and their requirements. I then will discuss the Extreme Adaptive Optics needed to compensate for the introduced wavefront error and how MEMS devices are a good choice to achieve the performance needed to produce the contrasts necessary to detect exoplanets. As examples, I will discuss a facility instrument for the Gemini Observatory, called the Gemini Planet Imager, that will detect Jupiter-like planets and present recent results from the NASA Ames Coronagraph Experiment laboratory, in the context of a proposed space- based mission called EXCEDE. EXCEDE is planned to focus on protoplanetary disks.

  2. Controlling laser driven protons acceleration using a deformable mirror at a high repetition rate

    Science.gov (United States)

    Noaman-ul-Haq, M.; Sokollik, T.; Ahmed, H.; Braenzel, J.; Ehrentraut, L.; Mirzaie, M.; Yu, L.-L.; Sheng, Z. M.; Chen, L. M.; Schnürer, M.; Zhang, J.

    2018-03-01

    We present results from a proof-of-principle experiment to optimize laser driven protons acceleration by directly feeding back its spectral information to a deformable mirror (DM) controlled by evolutionary algorithms (EAs). By irradiating a stable high-repetition rate tape driven target with ultra-intense pulses of intensities ∼1020 W/ cm2, we optimize the maximum energy of the accelerated protons with a stability of less than ∼5% fluctuations near optimum value. Moreover, due to spatio-temporal development of the sheath field, modulations in the spectrum are also observed. Particularly, a prominent narrow peak is observed with a spread of ∼15% (FWHM) at low energy part of the spectrum. These results are helpful to develop high repetition rate optimization techniques required for laser-driven ion accelerators.

  3. Special Lagrangian geometry as slightly deformed algebraic geometry (geometric quantization and mirror symmetry)

    International Nuclear Information System (INIS)

    Tyurin, A N

    2000-01-01

    The special geometry of calibrated cycles, which is closely related to the mirror symmetry among Calabi-Yau 3-manifolds, is in fact only a specialization of a more general geometry, which may naturally be called slightly deformed algebraic geometry or phase geometry. On the other hand, both of these geometries are parallel to classical gauge theory and its complexification. This article explains this parallelism. Hence the appearance of new invariants in complexified gauge theory is accompanied by the appearance of analogous invariants in the theory of special Lagrangian cycles, whose development is at present much more modest. Algebraic geometry is transformed into special Lagrangian geometry by the geometric Fourier transform (GFT). Roughly speaking, this construction coincides with the well-known 'spectral curve' constructions plus phase geometry

  4. Real-time wavefront correction system using a zonal deformable mirror and a Hartmann sensor

    International Nuclear Information System (INIS)

    Salmon, J.T.; Bliss, E.S.; Long, T.W.; Orham, E.L.; Presta, R.W.; Swift, C.D.; Ward, R.S.

    1991-07-01

    We have developed an adaptive optics system that corrects up to five waves of 2nd-order and 3rd-order aberrations in a high-power laser beam to less than 1/10th wave RMS. The wavefront sensor is a Hartmann sensor with discrete lenses and position-sensitive photodiodes; the deformable mirror uses piezoelectric actuators with feedback from strain gauges bonded to the stacks. The controller hardware uses a VME bus. The system removes thermally induced aberrations generated in the master-oscillator-power-amplifier chains of a dye laser, as well as aberrations generated in beam combiners and vacuum isolation windows for average output powers exceeding 1 kW. The system bandwidth is 1 Hz, but higher bandwidths are easily attainable

  5. Optical MEMS for Earth observation

    Science.gov (United States)

    Liotard, Arnaud; Viard, Thierry; Noell, Wilfried; Zamkotsian, Frédéric; Freire, Marco; Guldimann, Benedikt; Kraft, Stefan

    2017-11-01

    Due to the relatively large number of optical Earth Observation missions at ESA, this area is interesting for new space technology developments. In addition to their compactness, scalability and specific task customization, optical MEMS could generate new functions not available with current technologies and are thus candidates for the design of future space instruments. Most mature components for space applications are the digital mirror arrays, the micro-deformable mirrors, the programmable micro diffraction gratings and tiltable micromirrors. A first selection of market-pull and techno-push concepts is done. In addition, some concepts are coming from outside Earth Observation. Finally two concepts are more deeply analyzed. The first concept is a programmable slit for straylight control for space spectro-imagers. This instrument is a push-broom spectroimager for which some images cannot be exploited because of bright sources in the field-of-view. The proposed concept consists in replacing the current entrance spectrometer slit by an active row of micro-mirrors. The MEMS will permit to dynamically remove the bright sources and then to obtain a field-of-view with an optically enhanced signal-to-noise ratio. The second concept is a push-broom imager for which the acquired spectrum can be tuned by optical MEMS. This system is composed of two diffractive elements and a digital mirror array. The first diffractive element spreads the spectrum. A micromirror array is set at the location of the spectral focal plane. By putting the micro-mirrors ON or OFF, we can select parts of field-of-view or spectrum. The second diffractive element then recombines the light on a push-broom detector. Dichroics filters, strip filter, band-pass filter could be replaced by a unique instrument.

  6. Image-based calibration of a deformable mirror in wide-field microscopy.

    Science.gov (United States)

    Turaga, Diwakar; Holy, Timothy E

    2010-04-10

    Optical aberrations limit resolution in biological tissues, and their influence is particularly large for promising techniques such as light-sheet microscopy. In principle, image quality might be improved by adaptive optics (AO), in which aberrations are corrected by using a deformable mirror (DM). To implement AO in microscopy, one requires a method to measure wavefront aberrations, but the most commonly used methods have limitations for samples lacking point-source emitters. Here we implement an image-based wavefront-sensing technique, a variant of generalized phase-diverse imaging called multiframe blind deconvolution, and exploit it to calibrate a DM in a light-sheet microscope. We describe two methods of parameterizing the influence of the DM on aberrations: a traditional Zernike expansion requiring 1040 parameters, and a direct physical model of the DM requiring just 8 or 110 parameters. By randomizing voltages on all actuators, we show that the Zernike expansion successfully predicts wavefronts to an accuracy of approximately 30 nm (rms) even for large aberrations. We thus show that image-based wavefront sensing, which requires no additional optical equipment, allows a simple but powerful method to calibrate a deformable optical element in a microscope setting.

  7. Compact Low-Power Driver for Deformable Mirror Systems, Phase II

    Data.gov (United States)

    National Aeronautics and Space Administration — This proposal describes a new concept to drive MEMS DMs using low-power, high-voltage multiplexing. Compared to other reported approaches, the proposed architecture...

  8. Preparation and Characterization of Silver Liquid Thin Films for Magnetic Fluid Deformable Mirror

    Directory of Open Access Journals (Sweden)

    Lianchao Zhang

    2015-01-01

    Full Text Available Silver liquid thin film, formed by silver nanoparticles stacking and spreading on the surface of the liquid, is one of the important parts of magnetic fluid deformable mirror. First, silver nanoparticles were prepared by liquid phase chemical reduction method using sodium citrate as reducing agent and stabilizer and silver nitrate as precursor. Characterization of silver nanoparticles was studied using X-ray diffractometer, UV-vis spectrophotometer, and transmission electron microscope (TEM. The results showed that silver nanoparticles are spherical and have a good monodispersity. Additionally, the effect of the reaction conditions on the particle size of silver is obvious. And then silver liquid thin films were prepared by oil-water two-phase interface technology using as-synthesized silver nanoparticles. Properties of the film were investigated using different technology. The results showed that the film has good reflectivity and the particle size has a great influence on the reflectivity of the films. SEM photos showed that the liquid film is composed of multilayer silver nanoparticles. In addition, stability of the film was studied. The results showed that after being stored for 8 days under natural conditions, the gloss and reflectivity of the film start to decrease.

  9. Demonstration of symmetric dark holes using two deformable mirrors at the high-contrast imaging testbed

    Science.gov (United States)

    Riggs, A. J. Eldorado; Groff, Tyler D.; Carlotti, Alexis; Kasdin, N. Jeremy; Cady, Eric J.; Kern, Brian D.; Kuhnert, Andreas

    2013-09-01

    The High Contrast Imaging Laboratory (HCIL) at Princeton has developed several important algorithms and technologies for space-based coronagraphy missions to detect earth-like exoplanets. Before June 2013 the HCIL was the only facility with two deformable mirrors (DMs) in series for focal plane wavefront control, which allows for quasi-static speckle correction on both sides of the image plane. From June through August 2013, the High- Contrast Imaging Testbed (HCIT) at JPL had a second DM installed. In this paper we report on the results of our Technology Development for Exoplanet Missions project to achieve high contrast in two symmetric dark holes using a shaped pupil (SP) coronagraph at the HCIT. Our previous experiment with a similar SP at the HCIT in 2007 yielded single-sided dark holes. That experiment utilized an iterative, batch-process wavefront estimator and Electric Field Conjugation for wavefront control. Our current tests use the faster Kalman filter estimator and the stroke minimization control algorithm. We use the same ripple-style SPs as in the previous HCIT experiment because that mask manufacturing technique proved successful. Our tests of symmetric dark holes in monochromatic light at the HCIT demonstrate Princeton's steady improvements in wavefront control and estimation techniques for a space-based coronagraphy mission.

  10. Temporal synchronization and spectral combining of pulses from fiber lasers Q-switched by independent MEMS micro-mirrors.

    Science.gov (United States)

    Fabert, Marc; Desfarges-Berthelemot, Agnès; Kermène, Vincent; Crunteanu, Aurelian

    2012-09-24

    We present what we believe to be the first demonstration of spectral combining of multiple fiber lasers Q-switched by independent micro-electro-mechanical system (MEMS). By correlating the actuation of the individual MEMS devices, the associated Q-switched lasers can be operated in either synchronous or asynchronous modes in such a way that their overall combined output may result in high energy emission pulses or in laser emission with higher pulse repetition rate. In a proof-of-principle experiment, we demonstrate the combination of four individual Q-switched lasers (each of them operating at 20 kHz repetition rate) leading to a final laser system generating pulses with a repetition rate of 80 kHz.

  11. A correction algorithm to simultaneously control dual deformable mirrors in a woofer-tweeter adaptive optics system

    Science.gov (United States)

    Li, Chaohong; Sredar, Nripun; Ivers, Kevin M.; Queener, Hope; Porter, Jason

    2010-01-01

    We present a direct slope-based correction algorithm to simultaneously control two deformable mirrors (DMs) in a woofer-tweeter adaptive optics system. A global response matrix was derived from the response matrices of each deformable mirror and the voltages for both deformable mirrors were calculated simultaneously. This control algorithm was tested and compared with a 2-step sequential control method in five normal human eyes using an adaptive optics scanning laser ophthalmoscope. The mean residual total root-mean-square (RMS) wavefront errors across subjects after adaptive optics (AO) correction were 0.128 ± 0.025 μm and 0.107 ± 0.033 μm for simultaneous and 2-step control, respectively (7.75-mm pupil). The mean intensity of reflectance images acquired after AO convergence was slightly higher for 2-step control. Radially-averaged power spectra calculated from registered reflectance images were nearly identical for all subjects using simultaneous or 2-step control. The correction performance of our new simultaneous dual DM control algorithm is comparable to 2-step control, but is more efficient. This method can be applied to any woofer-tweeter AO system. PMID:20721058

  12. Creating flat-top X-ray beams by applying surface profiles of alternating curvature to deformable piezo bimorph mirrors.

    Science.gov (United States)

    Sutter, John P; Alcock, Simon G; Kashyap, Yogesh; Nistea, Ioana; Wang, Hongchang; Sawhney, Kawal

    2016-11-01

    Beam shaping is becoming increasingly important for synchrotron X-ray applications. Although routine for visible light lasers, this is challenging for X-rays due to the limited source coherence and extreme optical tolerances required for the shaping mirrors. In deliberate defocusing, even surface errors mirrors of fixed curvature. Such optics are useful for providing a fixed size of X-ray beam, but do not provide the adaptability required by many experiments. In contrast, deformable piezo bimorph mirrors permit a continuous range of X-ray beam sizes and shapes. A new theory is developed for applying non-periodic modifications of alternating curvature to optical surfaces. The position and length of the segments may be freely chosen. For the first time, surface modifications of alternating curvature are applied to bimorph mirrors to generate non-Gaussian X-ray beam profiles of specified width. The new theory's freedom is exploited to choose the segments to match the polishing errors of medium wavelength (>10 mm) and the piezos' influence on the mirror's figure. Five- and seven-segment modifications of alternating curvature are calculated and verified by visible light and X-ray metrology. The latter yields beam profiles with less striation than those made by defocusing. Remaining beam striations are explained by applying geometrical optics to the deviations from the ideal surface modifications of alternating curvature.

  13. Next-Generation Deformable Mirrors for Astronomical Coronagraphy by Utilizing PMN-PT Single Crystal Stack Actuators in integration with Driver ASIC, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — This SBIR Phase I project aims to develop a new manufacturing approach for deformable mirrors (DMs) by batch fabricating the stack actuator array. The innovation...

  14. A multi-electrode and pre-deformed bilayer spring structure electrostatic attractive MEMS actuator with large stroke at low actuation voltage

    International Nuclear Information System (INIS)

    Hu, Fangrong; Li, Zhi; Xiong, Xianming; Niu, Junhao; Peng, Zhiyong; Qian, Yixian; Yao, Jun

    2012-01-01

    This paper presents a multi-electrode and pre-deformed bilayer spring structure electrostatic attractive microelectromechanical systems (MEMS) actuator; it has large stroke at relatively low actuation voltage. Generally, electrostatic-attractive-force-based actuators have small stroke due to the instability resulted from the electrostatic ‘pull-in’ phenomenon. However, in many applications, the electrostatic micro-actuator with large stroke at low voltage is more preferred. By introducing a multi-electrode and a pre-deformed bilayer spring structure, an electrostatic attractive MEMS actuator with large stroke at very low actuation voltage has been successfully demonstrated in this paper. The actuator contains a central plate with a size of 300 µm × 300 µm × 1.5 µm and it is supported by four L-shaped bilayer springs which are pre-deformed due to residual stresses. Each bilayer spring is simultaneously attracted by three adjacent fixed electrodes, and the factors affecting the electrostatic attractive force are analyzed by a finite element analysis method. The prototype of the actuator is fabricated by poly-multi-user-MEMS-process (PolyMUMP) and the static performance is tested using a white light interferometer. The measured stroke of the actuator reaches 2 µm at 13 V dc, and it shows a good agreement with the simulation. (paper)

  15. Influence of thermal deformation in cavity mirrors on beam propagation characteristics of high-power slab lasers

    Science.gov (United States)

    Wang, Zhen; Xiao, Longsheng; Wang, Wei; Wu, Chao; Tang, Xiahui

    2018-01-01

    Owing to their good diffusion cooling and low sensitivity to misalignment, slab-shape negative-branch unstable-waveguide resonators are widely used for high-power lasers in industry. As the output beam of the resonator is astigmatic, an external beam shaping system is required. However, the transverse dimension of the cavity mirrors in the resonator is large. For a long-time operation, the heating of cavity mirrors can be non-uniform. This results in micro-deformation and a change in the radius of curvature of the cavity mirrors, and leads to an output beam of an offset optical axis of the resonator. It was found that a change in the radius of curvature of 0.1% (1 mm) caused by thermal deformation generates a transverse displacement of 1.65 mm at the spatial filter of the external beam shaping system, and an output power loss of more than 80%. This can potentially burn out the spatial filter. In order to analyze the effect of the offset optical axis of the beam on the external optical path, we analyzed the transverse displacement and rotational misalignments of the spatial filter. For instance, if the transverse displacement was 0.3 mm, the loss in the output power was 9.6% and a sidelobe appeared in the unstable direction. If the angle of rotation was 5°, the loss in the output power was 2%, and the poles were in the direction of the waveguide. Based on these results, by adjusting the bending mirror, the deviation angle of the output beam of the resonator cavity was corrected, in order to obtain maximum output power and optimal beam quality. Finally, the propagation characteristics of the corrected output beam were analyzed.

  16. Optical Correction Of Space-Based Telescopes Using A Deformable Mirror System

    Science.gov (United States)

    2016-12-01

    Experimental work first studied a severely degraded one-meter carbon fiber reinforced polymer mirror to establish a baseline. Simulations were...telescope. Experimental work first studied a severely degraded one-meter carbon fiber reinforced polymer mirror to establish a baseline. Simulations...the rays at the exit pupil. The magnification relationship allows for Equation 4.1 to be written as 4 4( , ) cos( ) ( , ) cos( )R PM PM DM PMd x y d

  17. Phase and amplitude beam shaping with two deformable mirrors implementing input plane and Fourier plane phase modifications.

    Science.gov (United States)

    Wu, Chensheng; Ko, Jonathan; Rzasa, John R; Paulson, Daniel A; Davis, Christopher C

    2018-03-20

    We find that ideas in optical image encryption can be very useful for adaptive optics in achieving simultaneous phase and amplitude shaping of a laser beam. An adaptive optics system with simultaneous phase and amplitude shaping ability is very desirable for atmospheric turbulence compensation. Atmospheric turbulence-induced beam distortions can jeopardize the effectiveness of optical power delivery for directed-energy systems and optical information delivery for free-space optical communication systems. In this paper, a prototype adaptive optics system is proposed based on a famous image encryption structure. The major change is to replace the two random phase plates at the input plane and Fourier plane of the encryption system, respectively, with two deformable mirrors that perform on-demand phase modulations. A Gaussian beam is used as an input to replace the conventional image input. We show through theory, simulation, and experiments that the slightly modified image encryption system can be used to achieve arbitrary phase and amplitude beam shaping within the limits of stroke range and influence function of the deformable mirrors. In application, the proposed technique can be used to perform mode conversion between optical beams, generate structured light signals for imaging and scanning, and compensate atmospheric turbulence-induced phase and amplitude beam distortions.

  18. Method of Analysis for Determining and Correcting Mirror Deformation due to Gravity

    Science.gov (United States)

    2014-01-01

    in place by an alumi- num alloy mount, as illustrated in Fig. 5. There are three equally spaced front pads, three corresponding and opposing rear...conceived of as levered mechanisms with flexure pivots, one end attached to Invar ® pucks and the other to the mirror cell. The pucks are adhered to the

  19. Design of a Compact, Bimorph Deformable Mirror-Based Adaptive Optics Scanning Laser Ophthalmoscope.

    Science.gov (United States)

    He, Yi; Deng, Guohua; Wei, Ling; Li, Xiqi; Yang, Jinsheng; Shi, Guohua; Zhang, Yudong

    2016-01-01

    We have designed, constructed and tested an adaptive optics scanning laser ophthalmoscope (AOSLO) using a bimorph mirror. The simulated AOSLO system achieves diffraction-limited criterion through all the raster scanning fields (6.4 mm pupil, 3° × 3° on pupil). The bimorph mirror-based AOSLO corrected ocular aberrations in model eyes to less than 0.1 μm RMS wavefront error with a closed-loop bandwidth of a few Hz. Facilitated with a bimorph mirror at a stroke of ±15 μm with 35 elements and an aperture of 20 mm, the new AOSLO system has a size only half that of the first-generation AOSLO system. The significant increase in stroke allows for large ocular aberrations such as defocus in the range of ±600° and astigmatism in the range of ±200°, thereby fully exploiting the AO correcting capabilities for diseased human eyes in the future.

  20. MEMS DM development at Iris AO, Inc.

    Science.gov (United States)

    Helmbrecht, Michael A.; He, Min; Kempf, Carl J.; Besse, Marc

    2011-03-01

    Iris AO is actively developing piston-tip-tilt (PTT) segmented MEMS deformable mirrors (DM) and adaptive optics (AO) controllers for these DMs. This paper discusses ongoing research at Iris AO that has advanced the state-of-the-art of these devices and systems over the past year. Improvements made to open-loop operation and mirror fabrication enables mirrors to open-loop flatten to 4 nm rms. Additional testing of an anti snap-in technology was conducted and demonstrates that the technology can withstand 100 million snap-in events without failure. Deformable mirrors with dielectric coatings are shown that are capable of handling 630 W/cm2 of incident laser power. Over a localized region on the segment, the dielectric coatings can withstand 100kW/cm2 incident laser power for 30 minutes. Results from the first-ever batch of PTT489 DMs that were shipped to pilot customers are reported. Optimizations made to the open-loop PTT controller are shown to have latencies of 157.5 μs and synchronous array update rates of nearly 6.5 kHz. Finally, plans for the design and fabrication of the next-generation PTT939 DM are presented.

  1. Finite Element Analysis of High Heat Load Deformation and Mechanical Bending Correction of a Beamline Mirror for the APS Upgrade

    Science.gov (United States)

    Goldring, Nicholas

    The impending Advanced Photon Source Upgrade (APS-U) will introduce a hard x-ray source that is set to surpass the current APS in brightness and coherence by two to three orders of magnitude. To achieve this, the storage ring light source will be equipped with a multi-bend achromat (MBA) lattice. In order to fully exploit and preserve the integrity of new beams actualized by upgraded storage ring components, improved beamline optics must also be introduced. The design process of new optics for the APS-U and other fourth generation synchrotrons involves the challenge of accommodating unprecedented heat loads. This dissertation presents an ex-situ analysis of heat load deformation and the subsequent mechanical bending correction of a 400 mm long, grazing-incidence, H2O side-cooled, reflecting mirror subjected to x-ray beams produced by the APS-U undulator source. Bending correction is measured as the smallest rms slope error, sigmarms, that can be resolved over a given length of the heat deformed geometry due to mechanical bending. Values of sigmarms in the account for finish errors or other contributions to sigmarms beyond the scope of thermal deformation and elastic bending. The methodology of this research includes finite element analysis (FEA) employed conjointly with an analytical solution for mechanical bending deflection by means of an end couple. Additionally, the study will focus on two beam power density profiles predicted by the APS-U which were created using the software SRCalc. The profiles account for a 6 GeV electron beam with second moment widths of 0.058 and 0.011 mm in the x- and y- directions respectively; the electron beam is passed through a 4.8 m long, 28 mm period APS-U undulator which produces the x-ray beam incident at a 3 mrad grazing angle on the flat mirror surface for both cases. The first power density profile is the most extreme case created by the undulator at it's closest gap with a critical energy of 3 keV (k y=2.459); the second

  2. Phase and amplitude modification of a laser beam by two deformable mirrors using conventional 4f image encryption techniques

    Science.gov (United States)

    Wu, Chensheng; Ko, Jonathan; Rzasa, John Robertson; Davis, Christopher C.

    2017-08-01

    The image encryption and decryption technique using lens components and random phase screens has attracted a great deal of research interest in the past few years. In general, the optical encryption technique can translate a positive image into an image with nearly a white speckle pattern that is impossible to decrypt. However, with the right keys as conjugated random phase screens, the white noise speckle pattern can be decoded into the original image. We find that the fundamental ideas in image encryption can be borrowed and applied to carry out beam corrections through turbulent channels. Based on our detailed analysis, we show that by using two deformable mirrors arranged in similar fashions as in the image encryption technique, a large number of controllable phase and amplitude distribution patterns can be generated from a collimated Gaussian beam. Such a result can be further coupled with wavefront sensing techniques to achieve laser beam correction against turbulence distortions. In application, our approach leads to a new type of phase conjugation mirror that could be beneficial for directed energy systems.

  3. Nearly diffraction-limited X-ray focusing with variable-numerical-aperture focusing optical system based on four deformable mirrors.

    Science.gov (United States)

    Matsuyama, Satoshi; Nakamori, Hiroki; Goto, Takumi; Kimura, Takashi; Khakurel, Krishna P; Kohmura, Yoshiki; Sano, Yasuhisa; Yabashi, Makina; Ishikawa, Tetsuya; Nishino, Yoshinori; Yamauchi, Kazuto

    2016-04-21

    Unlike the electrostatic and electromagnetic lenses used in electron microscopy, most X-ray focusing optical systems have fixed optical parameters with constant numerical apertures (NAs). This lack of adaptability has significantly limited application targets. In the research described herein, we developed a variable-NA X-ray focusing system based on four deformable mirrors, two sets of Kirkpatrick-Baez-type focusing mirrors, in order to control the focusing size while keeping the position of the focus unchanged. We applied a mirror deformation procedure using optical/X-ray metrology for offline/online adjustments. We performed a focusing test at a SPring-8 beamline and confirmed that the beam size varied from 108 nm to 560 nm (165 nm to 1434 nm) in the horizontal (vertical) direction by controlling the NA while maintaining diffraction-limited conditions.

  4. Segmented MEMS Mirror Arrays Project

    Data.gov (United States)

    National Aeronautics and Space Administration — The objective of this proposal is to demonstrate the feasibility of manufacturing large-throw, low cross-talk, high resolution and fast responding-speed wavefront...

  5. X-ray beam-shaping via deformable mirrors: surface profile and point spread function computation for Gaussian beams using physical optics.

    Science.gov (United States)

    Spiga, D

    2018-01-01

    X-ray mirrors with high focusing performances are commonly used in different sectors of science, such as X-ray astronomy, medical imaging and synchrotron/free-electron laser beamlines. While deformations of the mirror profile may cause degradation of the focus sharpness, a deliberate deformation of the mirror can be made to endow the focus with a desired size and distribution, via piezo actuators. The resulting profile can be characterized with suitable metrology tools and correlated with the expected optical quality via a wavefront propagation code or, sometimes, predicted using geometric optics. In the latter case and for the special class of profile deformations with monotonically increasing derivative, i.e. concave upwards, the point spread function (PSF) can even be predicted analytically. Moreover, under these assumptions, the relation can also be reversed: from the desired PSF the required profile deformation can be computed analytically, avoiding the use of trial-and-error search codes. However, the computation has been so far limited to geometric optics, which entailed some limitations: for example, mirror diffraction effects and the size of the coherent X-ray source were not considered. In this paper, the beam-shaping formalism in the framework of physical optics is reviewed, in the limit of small light wavelengths and in the case of Gaussian intensity wavefronts. Some examples of shaped profiles are also shown, aiming at turning a Gaussian intensity distribution into a top-hat one, and checks of the shaping performances computing the at-wavelength PSF by means of the WISE code are made.

  6. Design and Fabrication of a Large-Stroke Deformable Mirror Using a Gear-Shape Ionic-Conductive Polymer Metal Composite

    Directory of Open Access Journals (Sweden)

    Guo-Dung John Su

    2012-08-01

    Full Text Available Conventional camera modules with image sensors manipulate the focus or zoom by moving lenses. Although motors, such as voice-coil motors, can move the lens sets precisely, large volume, high power consumption, and long moving time are critical issues for motor-type camera modules. A deformable mirror (DM provides a good opportunity to improve these issues. The DM is a reflective type optical component which can alter the optical power to focus the lights on the two dimensional optical image sensors. It can make the camera system operate rapidly. Ionic polymer metal composite (IPMC is a promising electro-actuated polymer material that can be used in micromachining devices because of its large deformation with low actuation voltage. We developed a convenient simulation model based on Young’s modulus and Poisson’s ratio. We divided an ion exchange polymer, also known as Nafion®, into two virtual layers in the simulation model: one was expansive and the other was contractive, caused by opposite constant surface forces on each surface of the elements. Therefore, the deformation for different IPMC shapes can be described more easily. A standard experiment of voltage vs. tip displacement was used to verify the proposed modeling. Finally, a gear shaped IPMC actuator was designed and tested. Optical power of the IPMC deformable mirror is experimentally demonstrated to be 17 diopters with two volts. The needed voltage was about two orders lower than conventional silicon deformable mirrors and about one order lower than the liquid lens.

  7. Introduction - MEMS Aerospace Applications

    Science.gov (United States)

    2004-02-01

    Advanced Materials and Fabrication Methods Commercial MEMS-based Products I-15 Digital Micromirrors for Sub-portable Projectors PLUS U3-880 • 2.9 lbs • 1.9...x 9” x 7” •SVGA (800 x 600) 10 um I-16 Digital Mirror Display (DMD) Texas Instruments, Inc. I-17 Micro flow-diffusion analysis system flow-diffusion

  8. MEMS packaging

    CERN Document Server

    Hsu , Tai-Ran

    2004-01-01

    MEMS Packaging discusses the prevalent practices and enabling techniques in assembly, packaging and testing of microelectromechanical systems (MEMS). The entire spectrum of assembly, packaging and testing of MEMS and microsystems, from essential enabling technologies to applications in key industries of life sciences, telecommunications and aerospace engineering is covered. Other topics included are bonding and sealing of microcomponents, process flow of MEMS and microsystems packaging, automated microassembly, and testing and design for testing.The Institution of Engineering and Technology is

  9. LaMEM: a Massively Parallel Staggered-Grid Finite-Difference Code for Thermo-Mechanical Modeling of Lithospheric Deformation with Visco-Elasto-Plastic Rheologies

    Science.gov (United States)

    Kaus, B.; Popov, A.

    2014-12-01

    The complexity of lithospheric rheology and the necessity to resolve the deformation patterns near the free surface (faults and folds) sufficiently well places a great demand on a stable and scalable modeling tool that is capable of efficiently handling nonlinearities. Our code LaMEM (Lithosphere and Mantle Evolution Model) is an attempt to satisfy this demand. The code utilizes a stable and numerically inexpensive finite difference discretization with the spatial staggering of velocity, pressure, and temperature unknowns (a so-called staggered grid). As a time discretization method the forward Euler, or a combination of the predictor-corrector and the fourth-order Runge-Kutta can be chosen. Elastic stresses are rotated on the markers, which are also used to track all relevant material properties and solution history fields. The Newtonian nonlinear iteration, however, is handled at the level of the grid points to avoid spurious averaging between markers and grid. Such an arrangement required us to develop a non-standard discretization of the effective strain-rate second invariant. Important feature of the code is its ability to handle stress-free and open-box boundary conditions, in which empty cells are simply eliminated from the discretization, which also solves the biggest problem of the sticky-air approach - namely large viscosity jumps near the free surface. We currently support an arbitrary combination of linear elastic, nonlinear viscous with multiple creep mechanisms, and plastic rheologies based on either a depth-dependent von Mises or pressure-dependent Drucker-Prager yield criteria.LaMEM is being developed as an inherently parallel code. Structurally all its parts are based on the building blocks provided by PETSc library. These include Jacobian-Free Newton-Krylov nonlinear solvers with convergence globalization techniques (line search), equipped with different linear preconditioners. We have also implemented the coupled velocity-pressure multigrid

  10. Development of an adaptive optics test-bed for relay mirror applications

    Science.gov (United States)

    Mansell, Justin D.; Jacobs, Arturo A.; Maynard, Morris

    2005-08-01

    The relay mirror concept involves deploying a passive optical station at a high altitude for relaying a beam from a laser weapon to a target. Relay mirrors have been proposed as a method of increasing the range of laser weapons that is less costly than deploying a larger number of laser weapons. Relay mirrors will only be effective if the beam spreading and beam quality degradation induced by atmospheric aberrations and thermal blooming can be mitigated. In this paper we present the first phase of a multi-year effort to develop a theoretical and experimental capability at Boeing-SVS to study these problems. A team from MZA and Boeing-SVS has developed a laboratory test-bed consisting of a distributed atmospheric path simulated by three liquid crystal phase screens, a Shack-Hartmann wavefront sensor, and a MEMS membrane deformable mirror. We present results of AO component calibration and evaluation, the system construction, and the system performance.

  11. Optically pumped 1550nm wavelength tunable MEMS VCSEL

    DEFF Research Database (Denmark)

    Sahoo, Hitesh Kumar; Ansbæk, Thor; Ottaviano, Luisa

    2016-01-01

    The paper presents the design and fabrication of an optically pumped 1550nm tunable MEMS VCSEL with anenclosed MEMS. The MEMS is defined in SOI and the active material, an InP wafer with quantum wells arebonded to the SOI and the last mirror is made from the deposition of dielectric materials. Th....... The design bringsin flexibility to fabricate MEMS VCSELs over a wider range of wavelengths. The paper discusses results fromthe simulations and bonding results from fabrication. The device will push the boundaries for wavelength sweepspeed and bandwidth.......The paper presents the design and fabrication of an optically pumped 1550nm tunable MEMS VCSEL with anenclosed MEMS. The MEMS is defined in SOI and the active material, an InP wafer with quantum wells arebonded to the SOI and the last mirror is made from the deposition of dielectric materials...

  12. Compact MEMS-based Adaptive Optics Optical Coherence Tomography for Clinical Use

    Energy Technology Data Exchange (ETDEWEB)

    Chen, D; Olivier, S; Jones, S; Zawadzki, R; Evans, J; Choi, S; Werner, J

    2008-02-04

    We describe a compact MEMS-based adaptive optics (AO) optical coherence tomography system with improved AO performance and ease of clinical use. A typical AO system consists of a Shack-Hartmann wavefront sensor and a deformable mirror that measures and corrects the ocular and system aberrations. Because of the limitation on the current deformable mirror technologies, the amount of real-time ocular-aberration compensation is restricted and small in the previous AO-OCT instruments. In this instrument, we proposed to add an optical apparatus to correct the spectacle aberrations of the patients such as myopia, hyperopia and astigmatism. This eliminated the tedious process of the trial lenses in clinical imaging. Different amount of spectacle aberration compensation was achieved by motorized stages and automated with the AO computer for ease of clinical use. In addition, the compact AO-OCT was optimized to have minimum system aberrations to reduce AO registration errors and improve AO performance.

  13. Compact MEMS-based adaptive optics: optical coherence tomography for clinical use

    Science.gov (United States)

    Chen, Diana C.; Olivier, Scot S.; Jones, Steven M.; Zawadzki, Robert J.; Evans, Julia W.; Choi, Stacey S.; Werner, John S.

    2008-02-01

    We describe a compact MEMS-based adaptive optics (AO) optical coherence tomography (OCT) system with improved AO performance and ease of clinical use. A typical AO system consists of a Shack-Hartmann wavefront sensor and a deformable mirror that measures and corrects the ocular and system aberrations. Because of limitations on current deformable mirror technologies, the amount of real-time ocular-aberration compensation is restricted and small in previous AO-OCT instruments. In this instrument, we incorporate an optical apparatus to correct the spectacle aberrations of the patients such as myopia, hyperopia and astigmatism. This eliminates the tedious process of using trial lenses in clinical imaging. Different amount of spectacle aberration compensation was achieved by motorized stages and automated with the AO computer for ease of clinical use. In addition, the compact AO-OCT was optimized to have minimum system aberrations to reduce AO registration errors and improve AO performance.

  14. Cryogenic Active Mirrors

    Data.gov (United States)

    National Aeronautics and Space Administration — This effort seeks to develop active mirrors that can correct for thermally-induced figure deformations upon cooling from room-temperature at the time of manufacture,...

  15. The actuator design and the experimental tests of a new technology large deformable mirror for visible wavelengths adaptive optics

    Science.gov (United States)

    Del Vecchio, Ciro; Agapito, Guido; Arcidiacono, Carmelo; Carbonaro, Luca; Marignetti, Fabrizio; De Santis, Enzo; Biliotti, Valdemaro; Riccardi, Armando

    2012-07-01

    Recently, Adaptive Secondary Mirrors showed excellent on-sky results in the Near Infrared wavelengths. They currently provide 30mm inter-actuator spacing and about 1 kHz bandwidth. Pushing these devices to be operated at visible wavelengths is a challenging task. Compared to the current systems, working in the infrared, the more demanding requirements are the higher spatial resolution and the greater correction bandwidth. In fact, the turbulence scale is shorter and the parameter variation is faster. Typically, the former is not larger than 25 mm (projected on the secondary mirror) and the latter is 2 kHz, therefore the actuator has to be more slender and faster than the current ones. With a soft magnetic composite core, a dual-stator and a single-mover, VRALA, the actuator discussed in this paper, attains unprecedented performances with a negligible thermal impact. Pre-shaping the current required to deliver a given stroke greatly simplifies the control system, whose output supplies the current generator. As the inductance depends on the mover position, the electronics of this generator, provided with an inductance measure circuit, works also as a displacement sensor, supplying the control system with an accurate feed-back signal. A preliminary prototype, built according to the several FEA thermo-magnetic analyses, has undergone some preliminary laboratory tests. The results of these checks, matching the design results in terms of power and force, show that the the magnetic design addresses the severe specifications.

  16. Free space optical communications utilizing MEMS adaptive optics correction

    Science.gov (United States)

    Thompson, Charles A.; Kartz, Michael W.; Flath, Laurence M.; Wilks, Scott C.; Young, Richard A.; Johnson, Gary W.; Ruggiero, Anthony J.

    2002-12-01

    Free space optical communications (FSO) are beginning to provide attractive alternatives to fiber-based solutions in many situations. Currently, a handful of companies provide fiberless alternatives especially aimed at corporate intranet and sporting event video. These solutions are geared toward solving the 'last mile' connectivity issues. There exists a potential need to extend this pathlength to distances much greater than a 1 km, particularly for government and military applications. For cases of long distance optical propagation, atmospheric turbulence will ultimately limit the maximum achievable data rate. In this paper, we propose a method of improved signal quality through the use of adaptive optics. In particular, we show work in progress toward a high-speed, small footprint Adaptive Optics system for horizontal and slant path laser communications. Such a system relies heavily on recent progress in Micro-Electro-Mechanical Systems (MEMS) deformable mirrors as well as improved communication and computational components.

  17. MEMS Calculator

    Science.gov (United States)

    SRD 166 MEMS Calculator (Web, free access)   This MEMS Calculator determines the following thin film properties from data taken with an optical interferometer or comparable instrument: a) residual strain from fixed-fixed beams, b) strain gradient from cantilevers, c) step heights or thicknesses from step-height test structures, and d) in-plane lengths or deflections. Then, residual stress and stress gradient calculations can be made after an optical vibrometer or comparable instrument is used to obtain Young's modulus from resonating cantilevers or fixed-fixed beams. In addition, wafer bond strength is determined from micro-chevron test structures using a material test machine.

  18. Thermal effects on beryllium mirrors

    International Nuclear Information System (INIS)

    Weinswig, S.

    1989-01-01

    Beryllium is probably the most frequently used material for spaceborne system scan mirrors. Beryllium's properties include lightweightedness, high Young's modulus, high stiffness value, high resonance value. As an optical surface, beryllium is usually nickel plated in order to produce a higher quality surface. This process leads to the beryllium mirror acting like a bimetallic device. The mirror's deformation due to the bimetallic property can possibly degrade the performance of the associated optical system. As large space borne systems are designed and as temperature considerations become more crucial in the instruments, the concern about temporal deformation of the scan mirrors becomes a prime consideration. Therefore, two sets of tests have been conducted in order to ascertain the thermal effects on nickel plated beryllium mirrors. These tests are categorized. The purpose of this paper is to present the values of the bimetallic effect on typical nickel plated beryllium mirrors

  19. Monitoring of slope-instabilities and deformations with Micro-Electro-Mechanical-Systems (MEMS) in wireless ad-hoc Sensor Networks

    Science.gov (United States)

    Arnhardt, C.; Fernández-Steeger, T. M.; Azzam, R.

    2009-04-01

    In most mountainous regions, landslides represent a major threat to human life, properties and infrastructures. Nowadays existing landslide monitoring systems are often characterized by high efforts in terms of purchase, installation, maintenance, manpower and material. In addition (or because of this) only small areas or selective points of the endangered zone can be observed by the system. Therefore the improvement of existing and the development of new monitoring and warning systems are of high relevance. The joint project "Sensor based Landslide Early Warning Systems" (SLEWS) deals with the development of a prototypic Alarm- and Early Warning system (EWS) for different types of landslides using low-cost micro-sensors (MEMS) integrated in a wireless sensor network (WSN). Modern so called Ad-Hoc, Multi-Hop wireless sensor networks (WSN) are characterized by a self organizing and self-healing capacity of the system (autonomous systems). The network consists of numerous individual and own energy-supply operating sensor nodes, that can send data packages from their measuring devices (here: MEMS) over other nodes (Multi-Hop) to a collection point (gateway). The gateway provides the interface to central processing and data retrieval units (PC, Laptop or server) outside the network. In order to detect and monitor the different landslide processes (like fall, topple, spreading or sliding) 3D MEMS capacitive sensors made from single silicon crystals and glass were chosen to measure acceleration, tilting and altitude changes. Based on the so called MEMS (Micro-Electro-Mechanical Systems) technology, the sensors combine very small mechanical and electronic units, sensing elements and transducers on a small microchip. The mass production of such type of sensors allows low cost applications in different areas (like automobile industries, medicine, and automation technology). Apart from the small and so space saving size and the low costs another advantage is the energy

  20. Virtual Mirrors

    Science.gov (United States)

    Greenslade, Thomas B., Jr.

    2010-01-01

    The multiple-reflection photograph in Fig. 1 was taken in an elevator on board the cruise ship Norwegian Jade in March 2008. Three of the four walls of the elevator were mirrored, allowing me to see the combination of two standard arrangements of plane mirrors: two mirrors set at 90 degrees to each other and two parallel mirrors. Optical phenomena…

  1. Geometry of mirror manifolds

    International Nuclear Information System (INIS)

    Aspinwall, P.S.; Luetken, C.A.

    1991-01-01

    We analyze the mirror manifold hypothesis in one and three dimensions using the simplest available representations of the N = 2 superconformal algebra. The symmetries of these tensor models can be divided out to give an explicit representation of the mirror, and we give a simple group theoretical algorithm for determining which symmetries should be used. We show that the mirror of a superconformal field theory does not always have a geometrical interpretation, but when it does, deformations of complex structure of one manifold are reflected in deformations of the Kaehler form of the mirror manifold, and we show how the large radius limit of a manifold corresponds to a large complex structure limit in the mirror manifold. The mirror of the Tian-Yau three generation model is constructed both as a conformal field theory and as an algebraic variety with Euler number six. The Hodge numbers of this manifolds are fixed, but the intersection numbes are highly ambiguous, presumably reflected a rich structure of multicritical points in the moduli space of the field theory. (orig.)

  2. Einstein's Mirror

    Science.gov (United States)

    Gjurchinovski, Aleksandar; Skeparovski, Aleksandar

    2008-01-01

    Reflection of light from a plane mirror in uniform rectilinear motion is a century-old problem, intimately related to the foundations of special relativity. The problem was first investigated by Einstein in his famous 1905 paper by using the Lorentz transformations to switch from the mirror's rest frame to the frame where the mirror moves at a…

  3. Biomaterials for MEMS

    CERN Document Server

    Chiao, Mu

    2011-01-01

    This book serves as a guide for practicing engineers, researchers, and students interested in MEMS devices that use biomaterials and biomedical applications. It is also suitable for engineers and researchers interested in MEMS and its applications but who do not have the necessary background in biomaterials.Biomaterials for MEMS highlights important features and issues of biomaterials that have been used in MEMS and biomedical areas. Hence this book is an essential guide for MEMS engineers or researchers who are trained in engineering institutes that do not provide the background or knowledge

  4. Microelectromechanical (MEM) thermal actuator

    Science.gov (United States)

    Garcia, Ernest J [Albuquerque, NM; Fulcher, Clay W. G. [Sandia Park, NM

    2012-07-31

    Microelectromechanical (MEM) buckling beam thermal actuators are disclosed wherein the buckling direction of a beam is constrained to a desired direction of actuation, which can be in-plane or out-of-plane with respect to a support substrate. The actuators comprise as-fabricated, linear beams of uniform cross section supported above the substrate by supports which rigidly attach a beam to the substrate. The beams can be heated by methods including the passage of an electrical current through them. The buckling direction of an initially straight beam upon heating and expansion is controlled by incorporating one or more directional constraints attached to the substrate and proximal to the mid-point of the beam. In the event that the beam initially buckles in an undesired direction, deformation of the beam induced by contact with a directional constraint generates an opposing force to re-direct the buckling beam into the desired direction. The displacement and force generated by the movement of the buckling beam can be harnessed to perform useful work, such as closing contacts in an electrical switch.

  5. Modularly Integrated MEMS Technology

    National Research Council Canada - National Science Library

    Eyoum, Marie-Angie N

    2006-01-01

    Process design, development and integration to fabricate reliable MEMS devices on top of VLSI-CMOS electronics without damaging the underlying circuitry have been investigated throughout this dissertation...

  6. Magic Mirrors

    Science.gov (United States)

    Mills, Allan

    2011-01-01

    "Magic mirrors" were so named because, when they were positioned to throw a reflected patch of sunlight on a nearby wall, this area contained an outline of a design cast on the back of the (bronze) mirror. Investigations begun in the 19th century showed that this was a response to heavy localized pressures exerted on the face of the thin mirror…

  7. An Opto-MEMS Multiobject Spectrograph

    Science.gov (United States)

    Kearney, K.; Ninkov, Z.; Zwarg, D.

    2000-05-01

    Optical MEMS (Micro-Electro-Mechanical-Structures) are an enabling technology for a new class of optical instrumentation designs. An opto-MEMS device consists of an array of microfabricated structures, each of which modulates the phase and/or amplitude of an incident light beam. Typically the devices consist of an array of moveable micromirrors - each of which reflects an incident beam in a unique direction (tilt), or with a unique phase shift (piston). One widely available opto-MEMS device is the Texas Instruments' Digital Micromirror Device (DMD). The DMD is an array of 16 micron x 16 micron square mirrors postioned on a 17 micron pitch. Each mirror can tilt +/- 10 degrees from the normal - reflecting a normally incident light beam +/- 20 degrees. By positioning the DMD in an intermediate image plane in an optical system, portions of the image can be directed into- or out-of the input pupil of the follow-on imaging optics. RIT is utilizing the DMD to construct a prototype multiobject spectrograph (RIT-MOS) for visible observations with terrestrial telescopes. The DMD array replaces the input slit of an imaging spectrograph, forming a 'virtual', programmable slit assembly. By acquiring a pre-image of the astronomical field, it is possible to select a multidude of objects, and to program the DMD to pass only those objects into the input optics of the imaging spectrograph. We will report on the design and characterizatotion of the RIT-MOS, as well as preliminary imaging results.

  8. Heterogeneous MEMS device assembly and integration

    Science.gov (United States)

    Topart, Patrice; Picard, Francis; Ilias, Samir; Alain, Christine; Chevalier, Claude; Fisette, Bruno; Paultre, Jacques E.; Généreux, Francis; Legros, Mathieu; Lepage, Jean-François; Laverdière, Christian; Ngo Phong, Linh; Caron, Jean-Sol; Desroches, Yan

    2014-03-01

    In recent years, smart phone applications have both raised the pressure for cost and time to market reduction, and the need for high performance MEMS devices. This trend has led the MEMS community to develop multi-die packaging of different functionalities or multi-technology (i.e. wafer) approaches to fabricate and assemble devices respectively. This paper reports on the fabrication, assembly and packaging at INO of various MEMS devices using heterogeneous assembly at chip and package-level. First, the performance of a giant (e.g. about 3 mm in diameter), electrostatically actuated beam steering mirror is presented. It can be rotated about two perpendicular axes to steer an optical beam within an angular cone of up to 60° in vector scan mode with an angular resolution of 1 mrad and a response time of 300 ms. To achieve such angular performance relative to mirror size, the microassembly was performed from sub-components fabricated from 4 different wafers. To combine infrared detection with inertial sensing, an electroplated proof mass was flip-chipped onto a 256×1 pixel uncooled bolometric FPA and released using laser ablation. In addition to the microassembly technology, performance results of packaged devices are presented. Finally, to simulate a 3072×3 pixel uncooled detector for cloud and fire imaging in mid and long-wave IR, the staggered assembly of six 512×3 pixel FPAs with a less than 50 micron pixel co-registration is reported.

  9. Horizontal path laser communications employing MEMS adaptive optics correction

    Science.gov (United States)

    Thompson, Charles A.; Wilks, Scott C.; Brase, James M.; Young, Richard A.; Johnson, Gary W.; Ruggiero, Anthony J.

    2002-02-01

    Horizontal path laser communications are beginning to provide attractive alternatives for high-speed optical communications. In particular, companies are beginning to sell fiberless alternatives for intranet and sporting event video. These applications are primarily aimed at short distance applications (on the order of 1 km pathlength). There exists a potential need to extend this pathlength to distances much greater than a 1km. For cases of long distance optical propagation, atmospheric turbulence will ultimately limit the maximum achievable data rate. In this paper, we propose a method of improved signal quality through the use of adaptive optics. In particular, we show work in progress toward a high-speed, small footprint Adaptive Optics system for horizontal path laser communications. Such a system relies heavily on recent progress in Micro-Electro-Mechanical Systems (MEMS) deformable mirrors as well as improved communication and computational components. In this paper we detail two Adaptive Optics approaches for improved through-put, the first is the compensated receiver (the traditional Adaptive Optics approach), the second is the compensated transmitter/receiver. The second approach allows for correction of the optical wavefront before transmission from the transmitter and prior to detection at the receiver.

  10. Progress of MEMS Scanning Micromirrors for Optical Bio-Imaging

    Directory of Open Access Journals (Sweden)

    Lih Y. Lin

    2015-11-01

    Full Text Available Microelectromechanical systems (MEMS have an unmatched ability to incorporate numerous functionalities into ultra-compact devices, and due to their versatility and miniaturization, MEMS have become an important cornerstone in biomedical and endoscopic imaging research. To incorporate MEMS into such applications, it is critical to understand underlying architectures involving choices in actuation mechanism, including the more common electrothermal, electrostatic, electromagnetic, and piezoelectric approaches, reviewed in this paper. Each has benefits and tradeoffs and is better suited for particular applications or imaging schemes due to achievable scan ranges, power requirements, speed, and size. Many of these characteristics are fabrication-process dependent, and this paper discusses various fabrication flows developed to integrate additional optical functionality beyond simple lateral scanning, enabling dynamic control of the focus or mirror surface. Out of this provided MEMS flexibility arises some challenges when obtaining high resolution images: due to scanning non-linearities, calibration of MEMS scanners may become critical, and inherent image artifacts or distortions during scanning can degrade image quality. Several reviewed methods and algorithms have been proposed to address these complications from MEMS scanning. Given their impact and promise, great effort and progress have been made toward integrating MEMS and biomedical imaging.

  11. Einstein's Mirror

    Science.gov (United States)

    Gjurchinovski, Aleksandar; Skeparovski, Aleksandar

    2008-10-01

    Reflection of light from a plane mirror in uniform rectilinear motion is a century-old problem, intimately related to the foundations of special relativity.1-4 The problem was first investigated by Einstein in his famous 1905 paper by using the Lorentz transformations to switch from the mirror's rest frame to the frame where the mirror moves at a constant velocity.5 Einstein showed an intriguing fact that the usual law of reflection would not hold in the case of a uniformly moving mirror, that is, the angles of incidence and reflection of the light would not equal each other. Later on, it has been shown that the law of reflection at a moving mirror can be obtained in various alternative ways,6-10 but none of them seems suitable for bringing this interesting subject into the high school classroom.

  12. Mirror symmetry

    CERN Document Server

    Voisin, Claire

    1999-01-01

    This is the English translation of Professor Voisin's book reflecting the discovery of the mirror symmetry phenomenon. The first chapter is devoted to the geometry of Calabi-Yau manifolds, and the second describes, as motivation, the ideas from quantum field theory that led to the discovery of mirror symmetry. The other chapters deal with more specialized aspects of the subject: the work of Candelas, de la Ossa, Greene, and Parkes, based on the fact that under the mirror symmetry hypothesis, the variation of Hodge structure of a Calabi-Yau threefold determines the Gromov-Witten invariants of its mirror; Batyrev's construction, which exhibits the mirror symmetry phenomenon between hypersurfaces of toric Fano varieties, after a combinatorial classification of the latter; the mathematical construction of the Gromov-Witten potential, and the proof of its crucial property (that it satisfies the WDVV equation), which makes it possible to construct a flat connection underlying a variation of Hodge structure in the ...

  13. Optical properties of relativistic plasma mirrors.

    Science.gov (United States)

    Vincenti, H; Monchocé, S; Kahaly, S; Bonnaud, G; Martin, Ph; Quéré, F

    2014-03-11

    The advent of ultrahigh-power femtosecond lasers creates a need for an entirely new class of optical components based on plasmas. The most promising of these are known as plasma mirrors, formed when an intense femtosecond laser ionizes a solid surface. These mirrors specularly reflect the main part of a laser pulse and can be used as active optical elements to manipulate its temporal and spatial properties. Unfortunately, the considerable pressures exerted by the laser can deform the mirror surface, unfavourably affecting the reflected beam and complicating, or even preventing, the use of plasma mirrors at ultrahigh intensities. Here we derive a simple analytical model of the basic physics involved in laser-induced deformation of a plasma mirror. We validate this model numerically and experimentally, and use it to show how such deformation might be mitigated by appropriate control of the laser phase.

  14. Optical fiber accelerometer based on MEMS torsional micromirror

    Science.gov (United States)

    Zeng, Fanlin; Zhong, Shaolong; Xu, Jing; Wu, Yaming

    2008-03-01

    A novel structure of optical fiber accelerometer based on MEMS torsional micro-mirror is introduced, including MEMS torsional micro-mirror and optical signal detection. The micro-mirror is a non-symmetric one, which means that the torsional bar supporting the micro-mirror is not located in the axis where the center of the micro-mirror locates. The optical signal detection is composed of PIN diode and dual fiber collimator, which is very sensitive to the coupling angle between the input fiber and output fiber. The detection principle is that acceleration is first transformed into torsional angle of the micro-mirror, then, optical insertion loss of the dual fiber collimator caused by the angle can be received by PIN. So under the flow of acceleration to torsional angle to optical signal attenuation to optical power detection, the acceleration is detected. The theory about sensing and optical signal detect of the device are discussed in this paper. The sensitive structure parameters and performance parameters are calculated by MATLAB. To simulate the static and modal analysis, the finite element analysis, ANSYS, is employed. Based on the above calculation, several optimization methods and the final structure parameters are given. The micro-mirror is completed by using silicon-glass bonding and deep reactive ion etching (DRIE). In the experiment, the acceleration is simulated by electrostatic force and the test results show that the static acceleration detection agrees with the theory analysis very well.

  15. Microelectromechanical Systems (MEMS)

    Indian Academy of Sciences (India)

    conference included a theme symposium on MEMS that spanned three days with paper presentations covering various aspects of MEMS technology. Out of all the papers presented in the symposium, we selected fifteen papers based on their reviews and other feedback and asked the authors to write the papers for ...

  16. On four dimensional mirror symmetry

    International Nuclear Information System (INIS)

    Losev, A.; Nekrasov, N.; Shatashvili, S.

    2000-01-01

    A conjecture relating instanton calculus in four dimensional supersymmetric theories and the deformation theory of Lagrangian submanifolds in C 2r invariant under a (subgroup of) Sp(2r,Z) is formulated. This is a four dimensional counterpart of the mirror symmetry of topological strings (relating Gromov-Witten invariants and generalized variations of Hodge structure). (orig.)

  17. Mirror, mirror on the wall

    CERN Multimedia

    2005-01-01

    RICH 2, one of the two Ring Imaging Cherenkov detectors of the LHCb experiment, is being prepared to join the other detector elements ready for the first proton-proton collisions at LHC. The mirrors of the RICH2 detector are meticulously assembled in a clean room.In a large dark room, men in white move around an immense structure some 7 metres high, 10 metres wide and nearly 2.5 metres deep. Apparently effortlessly, they are installing the two large high-precision spherical mirrors. These mirrors will focus Cherenkov light, created by the charged particles that will traverse this detector, onto the photon detectors. Each spherical mirror wall is made up of facets like a fly's eye. Twenty-eight individual thin glass mirrors will all point to the same point in space to within a few micro-radians. The development of these mirrors has been technically demanding : Ideally they should be massless, sturdy, precise and have high reflectivity. In practice, though not massless, they are made from a mere 6 mm thin gl...

  18. Development of a Piezoelectric Adaptive Mirror for Laser Beam Control

    CSIR Research Space (South Africa)

    Long, CS

    2008-06-01

    Full Text Available piezoelectric disc, providing a small, low-cost deformable mirror for this application. The mirror is required to be able to deform in the shape of each of the lower order Zernike polynomials, which describe aberrations in optical systems. Numerical modelling...

  19. [Mirror neurons].

    Science.gov (United States)

    Rubia Vila, Francisco José

    2011-01-01

    Mirror neurons were recently discovered in frontal brain areas of the monkey. They are activated when the animal makes a specific movement, but also when the animal observes the same movement in another animal. Some of them also respond to the emotional expression of other animals of the same species. These mirror neurons have also been found in humans. They respond to or "reflect" actions of other individuals in the brain and are thought to represent the basis for imitation and empathy and hence the neurobiological substrate for "theory of mind", the potential origin of language and the so-called moral instinct.

  20. Conicoid Mirrors

    Science.gov (United States)

    Castano, Diego J.; Hawkins, Lawrence C.

    2011-01-01

    The first-order equation relating object and image location for a mirror of arbitrary conic-sectional shape is derived. It is also shown that the parabolic reflecting surface is the only one free of aberration and only in the limiting case of distant sources. (Contains 3 figures.)

  1. Mirror Support

    Science.gov (United States)

    Baron, Richard L. (Inventor)

    2013-01-01

    Disclosed herein is a method of making a mirror support comprising a composite, the composite comprising a plurality of carbon nanotubes, wherein at least two of the plurality of carbon nanotubes are bonded to each other through a bridging moiety bound to each of the two carbon nanotubes, and a laminate comprising the composite.

  2. Electroplating of low stress permalloy for MEMS

    International Nuclear Information System (INIS)

    Zhang Yonghua; Ding Guifu; Cai Yuli; Wang Hong; Cai Bingchu

    2006-01-01

    With the wafer-bending method and spectrophotometry, the internal stress in electroplated Ni-Fe alloy for MEMS has been investigated as a function of bath concentration. This investigation demonstrated that low concentration plating solution is useful for the decrease of the residual stress in the electrodeposits, and the stress could further decrease with an increase of saccharin additive content. And the change of stress from tensile to compressive was not observed with the increase of the additive content in plating path. The low stress permalloy (Ni 81 Fe 19 ) was reached in our experimental conditions. A bistable electromagnetic RF MEMS switch with deformation-free bilayer cantilever beam was fabricated successfully by electroplated permalloy

  3. Recent development of micropore optics using MEMS technologies

    Science.gov (United States)

    Ezoe, Yuichiro; Koshiishi, Masaki; Mita, Makoto; Mitsuda, Kazuhisa; Ishisaki, Yoshitaka; Hoshino, Akio; Yang, Zhen; Takano, Takayuki; Mekaru, Harutaka; Maeda, Ryutaro

    2006-06-01

    Recent development of the extremely light-weight micro pore optics based on the semiconductor MEMS (Micro Electro Mechanical System) technologies is reported. Anisotropic chemical wet etching of silicon (110) wafers were utilized, in order to obtain a row of smooth (111) side walls vertical to the wafer face and to use them as X-ray mirrors. To obtain high performance mirrors with smooth surfaces and a high aspect ratio, several modifications were made to our previous manufacturing process shown in Ezoe et al. (2005). After these improvements, smooth surfaces with rms roughness of the order of angstroms and also a high aspect ratio of 20 were achieved. Furthermore, a single-stage optic was designed as a first step to multi-stage optics. A mounting device and a slit device for the sample optic were fabricated fully using the MEMS technologies and evaluated.

  4. What do mirror neurons mirror?

    NARCIS (Netherlands)

    Uithol, S.; Rooij, I.J.E.I. van; Bekkering, H.; Haselager, W.F.G.

    2011-01-01

    Single cell recordings in monkeys provide strong evidence for an important role of the motor system in action understanding. This evidence is backed up by data from studies of the (human) mirror neuron system using neuroimaging or TMS techniques, and behavioral experiments. Although the data

  5. Advanced Mechatronics and MEMS Devices

    CERN Document Server

    2013-01-01

    Advanced Mechatronics and MEMS Devicesdescribes state-of-the-art MEMS devices and introduces the latest technology in electrical and mechanical microsystems. The evolution of design in microfabrication, as well as emerging issues in nanomaterials, micromachining, micromanufacturing and microassembly are all discussed at length in this volume. Advanced Mechatronics also provides a reader with knowledge of MEMS sensors array, MEMS multidimensional accelerometer, artificial skin with imbedded tactile components, as well as other topics in MEMS sensors and transducers. The book also presents a number of topics in advanced robotics and an abundance of applications of MEMS in robotics, like reconfigurable modular snake robots, magnetic MEMS robots for drug delivery and flying robots with adjustable wings, to name a few. This book also: Covers the fundamentals of advanced mechatronics and MEMS devices while also presenting new state-of-the-art methodology and technology used in the application of these devices Prese...

  6. Mirror systems

    International Nuclear Information System (INIS)

    Howells, M.R.

    1985-12-01

    The physics of VUV and x-ray reflection is reviewed. The main functions of mirrors in synchrotron beamlines are stated briefly and include deflection, filtration, power absorption, formation of a real image of the source, focusing, and collimation. Methods of fabrication of optical surfaces are described. Types of imperfections are discussed, including, aberrations, surface figure inaccuracy, roughness, and degradation due to use. Calculation of the photon beam thermal load, including computer modelling, is considered. 50 refs., 7 figs

  7. Digital reflection holography based systems development for MEMS testing

    Science.gov (United States)

    Singh, Vijay Raj; Liansheng, Sui; Asundi, Anand

    2010-05-01

    MEMS are tiny mechanical devices that are built onto semiconductor chips and are measured in micrometers and nanometers. Testing of MEMS device is an important part in carrying out their functional assessment and reliability analysis. Development of systems based on digital holography (DH) for MEMS inspection and characterization is presented in this paper. Two DH reflection systems, table-top and handheld types, are developed depending on the MEMS measurement requirements and their capabilities are presented. The methodologies for the systems are developed for 3D profile inspection and static & dynamic measurements, which is further integrated with in-house developed software that provides the measurement results in near real time. The applications of the developed systems are demonstrated for different MEMS devices for 3D profile inspection, static deformation/deflection measurements and vibration analysis. The developed systems are well suitable for the testing of MEMS and Microsystems samples, with full-field, static & dynamic inspection as well as to monitor micro-fabrication process.

  8. Mid infrared MEMS FTIR spectrometer

    Science.gov (United States)

    Erfan, Mazen; Sabry, Yasser M.; Mortada, Bassem; Sharaf, Khaled; Khalil, Diaa

    2016-03-01

    In this work we report, for the first time to the best of our knowledge, a bulk-micromachined wideband MEMS-based spectrometer covering both the NIR and the MIR ranges and working from 1200 nm to 4800 nm. The core engine of the spectrometer is a scanning Michelson interferometer micro-fabricated using deep reactive ion etching (DRIE) technology. The spectrum is obtained using the Fourier Transform techniques that allows covering a very wide spectral range limited by the detector responsivity. The moving mirror of the interferometer is driven by a relatively large stroke electrostatic comb-drive actuator. Zirconium fluoride (ZrF4) multimode optical fibers are used to connect light between the white light source and the interferometer input, as well as the interferometer output to a PbSe photoconductive detector. The recorded signal-to-noise ratio is 25 dB at the wavelength of 3350 nm. The spectrometer is successfully used in measuring the absorption spectra of methylene chloride, quartz glass and polystyrene film. The presented solution provides a low cost method for producing miniaturized spectrometers in the near-/mid-infrared.

  9. Piezoelectric MEMS resonators

    CERN Document Server

    Piazza, Gianluca

    2017-01-01

    This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associate...

  10. EDITORIAL: International MEMS Conference 2006

    Science.gov (United States)

    Tay, Francis E. H.; Jianmin, Miao; Iliescu, Ciprian

    2006-04-01

    The International MEMS conference (iMEMS2006) organized by the Institute of Bioengineering and Nanotechnology and Nanyang Technological University aims to provide a platform for academicians, professionals and industrialists in various related fields from all over the world to share and learn from each other. Of great interest is the incorporation of the theme of life sciences application using MEMS. It is the desire of this conference to initiate collaboration and form network of cooperation. This has continued to be the objective of iMEMS since its inception in 1997. The technological advance of MEMS over the past few decades has been truly exciting in terms of development and applications. In order to participate in this rapid development, a conference involving delegates from within the MEMS community and outside the community is very meaningful and timely. With the receipt of over 200 articles, delegates related to MEMS field from all over the world will share their perspectives on topics such as MEMS/MST Design, MEMS Teaching and Education, MEMS/MST Packaging, MEMS/MST Fabrication, Microsystems Applications, System Integration, Wearable Devices, MEMSWear and BioMEMS. Invited speakers and delegates from outside the field have also been involved to provide challenges, especially in the life sciences field, for the MEMS community to potentially address. The proceedings of the conference will be published as an issue in the online Journal of Physics: Conference Series and this can reach a wider audience and will facilitate the reference and citation of the work presented in the conference. We wish to express our deep gratitude to the International Scientific Committee members and the organizing committee members for contributing to the success of this conference. We would like to thank all the delegates, speakers and sponsors from all over the world for presenting and sharing their perspectives on topics related to MEMS and the challenges that MEMS can

  11. Fast tunable blazed MEMS grating for external cavity lasers

    Science.gov (United States)

    Tormen, Maurizio; Niedermann, Philippe; Hoogerwerf, Arno; Shea, Herbert; Stanley, Ross

    2017-11-01

    Diffractive MEMS are interesting for a wide range of applications, including displays, scanners or switching elements. Their advantages are compactness, potentially high actuation speed and in the ability to deflect light at large angles. We have designed and fabricated deformable diffractive MEMS grating to be used as tuning elements for external cavity lasers. The resulting device is compact, has wide tunability and a high operating speed. The initial design is a planar grating where the beams are free-standing and attached to each other using leaf springs. Actuation is achieved through two electrostatic comb drives at either end of the grating. To prevent deformation of the free-standing grating, the device is 10 μm thick made from a Silicon on Insulator (SOI) wafer in a single mask process. At 100V a periodicity tuning of 3% has been measured. The first resonant mode of the grating is measured at 13.8 kHz, allowing high speed actuation. This combination of wide tunability and high operating speed represents state of the art in the domain of tunable MEMS filters. In order to improve diffraction efficiency and to expand the usable wavelength range, a blazed version of the deformable MEMS grating has been designed. A key issue is maintaining the mechanical properties of the original device while providing optically smooth blazed beams. Using a process based on anisotropic KOH etching, blazed gratings have been obtained and preliminary characterization is promising.

  12. Mirror fusion reactors

    International Nuclear Information System (INIS)

    Anon.

    1978-01-01

    Conceptual design studies were made of fusion reactors based on the three current mirror-confinement concepts: the standard mirror, the tandem mirror, and the field-reversed mirror. Recent studies of the standard mirror have emphasized its potential as a fusion-fission hybrid reactor, designed to produce fuel for fission reactors. We have designed a large commercial hybrid and a small pilot-plant hybrid based on standard mirror confinement. Tandem mirror designs include a commercial 1000-MWe fusion power plant and a nearer term tandem mirror hybrid. Field-reversed mirror designs include a multicell commercial reactor producing 75 MWe and a single-cell pilot plant

  13. Mirror fusion reactors

    International Nuclear Information System (INIS)

    Carlson, G.A.; Moir, R.W.

    1978-01-01

    We have carried out conceptual design studies of fusion reactors based on the three current mirror confinement concepts: the standard mirror, the tandem mirror, and the field-reversed mirror. Recent studies of the standard mirror have emphasized its potential as a fusion-fission hybrid reactor, designed to produce fission fuel for fission reactors. We have designed a large commercial hybrid based on standard mirror confinement, and also a small pilot plant hybrid. Tandem mirror designs include a commercial 1000 MWe fusion power plant and a nearer term tandem mirror hybrid. Field-reversed mirror designs include a multicell commercial reactor producing 75 MWe and a single cell pilot plant

  14. Integrated design of MEMS

    DEFF Research Database (Denmark)

    De Grave, Arnaud; Brissaud, Daniel

    2007-01-01

    . Manufacturing is mainly coming from the silicon industry. Our interest is to highlight the differences between designing MEMS and designing classical ICs or mechanical devices, to propose new methods and aided-tools supporting the design process. Our methodology is based on an ethnographic approach through...

  15. Photonic MEMS switch applications

    Science.gov (United States)

    Husain, Anis

    2001-07-01

    As carriers and service providers continue their quest for profitable network solutions, they have shifted their focus from raw bandwidth to rapid provisioning, delivery and management of revenue generating services. Inherently transparent to data rate the transmission wavelength and data format, MEMS add scalability, reliability, low power and compact size providing flexible solutions to the management and/or fiber channels in long haul, metro, and access networks. MEMS based photonic switches have gone from the lab to commercial availability and are now currently in carrier trials and volume production. 2D MEMS switches offer low up-front deployment costs while remaining scalable to large arrays. They allow for transparent, native protocol transmission. 2D switches enable rapid service turn-up and management for many existing and emerging revenue rich services such as storage connectivity, optical Ethernet, wavelength leasing and optical VPN. As the network services evolve, the larger 3D MEMS switches, which provide greater scalability and flexibility, will become economically viable to serve the ever-increasing needs.

  16. Microelectromechanical Systems (MEMS)

    Indian Academy of Sciences (India)

    As a field, Microelectromechanical Systems (MEMS) has matured over the last two decades to have several scientific journals dedicated to it. These journals are instrumental in bringing out the interdisciplinary nature of research that the field demands. In the beginning, most papers were process centric where realization of ...

  17. MEMS Solar Generators

    OpenAIRE

    Grbovic, Dragoslav; Osswald, Sebastian

    2011-01-01

    Approved for public release; distribution is unlimited Using MEMS bimaterial structures to build highly efficient solar energy generators. This is a novel approach that utilizes developments in the area of bimaterial sensors and applies them in the field of solar energy harvesting.

  18. Characterization of assembled MEMS

    Science.gov (United States)

    Jandric, Zoran; Randall, John N.; Saini, Rahul; Nolan, Michael; Skidmore, George

    2005-01-01

    Zyvex is developing a low-cost high-precision method for manufacturing MEMS-based three-dimensional structures/assemblies. The assembly process relies on compliant properties of the interconnecting components. The sockets and connectors are designed to benefit from their compliant nature by allowing the mechanical component to self-align, i.e. reposition themselves to their designed, stable position, independent of the initial placement of the part by the external robot. Thus, the self-aligning property guarantees the precision of the assembled structure to be very close to, or the same, as the precision of the lithography process itself. A three-dimensional (3D) structure is achieved by inserting the connectors into the sockets through the use of a passive end-effector. We have developed the automated, high-yield, assembly procedure which permits connectors to be picked up from any location within the same die, or a separate die. This general procedure allows for the possibility to assemble parts of dissimilar materials. We have built many 3D MEMS structures, including several 3D MEMS devices such as a scanning electron microscope (SEM) micro column, mass-spectrometer column, variable optical attenuator. For these 3D MEMS structures we characterize their mechanical strength through finite element simulation, dynamic properties by finite-element analysis and experimentally with UMECH"s MEMS motion analyzer (MMA), alignment accuracy by using an in-house developed dihedral angle measurement laser autocollimator, and impact properties by performing drop tests. The details of the experimental set-ups, the measurement procedures, and the experimental data are presented in this paper.

  19. European MEMS foundries

    Science.gov (United States)

    Salomon, Patric R.

    2003-01-01

    According to the latest release of the NEXUS market study, the market for MEMS or Microsystems Technology (MST) is predicted to grow to $68B by the year 2005, with systems containing these components generating even higher revenues and growth. The latest advances in MST/MEMS technology have enabled the design of a new generation of microsystems that are smaller, cheaper, more reliable, and consume less power. These integrated systems bring together numerous analog/mixed signal microelectronics blocks and MEMS functions on a single chip or on two or more chips assembled within an integrated package. In spite of all these advances in technology and manufacturing, a system manufacturer either faces a substantial up-front R&D investment to create his own infrastructure and expertise, or he can use design and foundry services to get the initial product into the marketplace fast and with an affordable investment. Once he has a viable product, he can still think about his own manufacturing efforts and investments to obtain an optimized high volume manufacturing for the specific product. One of the barriers to successful exploitation of MEMS/MST technology has been the lack of access to industrial foundries capable of producing certified microsystems devices in commercial quantities, including packaging and test. This paper discusses Multi-project wafer (MPW) runs, requirements for foundries and gives some examples of foundry business models. Furthermore, this paper will give an overview on MST/MEMS services that are available in Europe, including pure commercial activities, European project activities (e.g. Europractice), and some academic services.

  20. Adaptive metal mirror for high-power CO2 lasers

    Science.gov (United States)

    Jarosch, Uwe-Klaus

    1996-08-01

    Spherical mirrors with a variable radius of curvature are used inside laser resonators as well as in the beam path between the laser and the workpiece. Commercially-available systems use piezoelectric actuators, or the pressure of the coolant, to deform the mirror surface. In both cases, the actuator and the cooling system influence each other. This interaction is avoided through the integration of the cooling system with the flexible mirror membrane. A multi- channel design leads to an optimized cooling effect, which is necessary for high power applications. The contour of the variable metal mirror depends on the mounting between the membrane and the mirror body and on the distribution of forces. Four cases of deformation can be distinguished for a circular elastic membrane. The realization of an adaptive metal mirror requires a technical compromise to be made. A mechanical construction is presented which combines an elastic hinge with the inlet and outlet of the coolant. For the deformation of the mirror membranes two actuators with different character of deformation are used. The superposition of the two deformations results in smaller deviations from the spherical surface shape than can be achieved using a single actuator. DC proportional magnets have been introduced as cheap and rigid actuators. The use of this adaptive mirror, either in a low pressure atmosphere of a gas laser resonator, or in an extra-cavity beam path is made possible through the use of a ventilation system.

  1. Piston Motion Performance Analysis of a 3DOF Electrothermal MEMS Scanner for Medical Applications

    Science.gov (United States)

    Espinosa, A.; Rabenorosoa, K.; Clévy, C.; Komati, B.; Lutz, P.; Zhang, X.; Samuelson, S. R.; Xie, H.

    2014-07-01

    MEMS scanners are useful for medical applications as optical coherence tomography and laser microsurgery. Although widespread design of MEMS scanners have been presented, their behavior is not well known, and thus, their motions are not easily and efficiently controlled. This deficiency induces several difficulties (limited resolution, accuracy, cycle time, etc.), and to tackle this problem, this article presents the modeling of an ISC electrothermally actuated MEMS mirror and the experimental characterization for the piston motion. Modeling and characterization are important to implement the control. A multiphysic model is proposed, and an experimental validation is performed with a good correspondence for a voltage range from 0 V to 3.5 V with a maximum displacement up to 200 µm and with a relative tilting difference of 0.1°. The article also presents a simple and efficient experimental setup to measure a displacement in dynamic and static mode, or a mirror plane tilting in static mode.

  2. Adaptive deformable mirror dynamics and modular control

    NARCIS (Netherlands)

    Ellenbroek, R.M.L.

    2011-01-01

    The refractive index of air varies a.o. with temperature, humidity, pressure and the CO2 concentration. Due to atmospheric turbulence this refractive index varies both in space and in time, leading to aberrations in images of light having passed though it. These aberrations limit the achievable

  3. Highly elastic conductive polymeric MEMS

    Science.gov (United States)

    Ruhhammer, J.; Zens, M.; Goldschmidtboeing, F.; Seifert, A.; Woias, P.

    2015-02-01

    Polymeric structures with integrated, functional microelectrical mechanical systems (MEMS) elements are increasingly important in various applications such as biomedical systems or wearable smart devices. These applications require highly flexible and elastic polymers with good conductivity, which can be embedded into a matrix that undergoes large deformations. Conductive polydimethylsiloxane (PDMS) is a suitable candidate but is still challenging to fabricate. Conductivity is achieved by filling a nonconductive PDMS matrix with conductive particles. In this work, we present an approach that uses new mixing techniques to fabricate conductive PDMS with different fillers such as carbon black, silver particles, and multiwalled carbon nanotubes. Additionally, the electrical properties of all three composites are examined under continuous mechanical stress. Furthermore, we present a novel, low-cost, simple three-step molding process that transfers a micro patterned silicon master into a polystyrene (PS) polytetrafluoroethylene (PTFE) replica with improved release features. This PS/PTFE mold is used for subsequent structuring of conductive PDMS with high accuracy. The non sticking characteristics enable the fabrication of delicate structures using a very soft PDMS, which is usually hard to release from conventional molds. Moreover, the process can also be applied to polyurethanes and various other material combinations.

  4. Demonstration of a linear optical true-time delay device by use of a microelectromechanical mirror array

    Science.gov (United States)

    Rader, Amber; Anderson, Betty Lise

    2003-03-01

    We present the design and proof-of-concept demonstration of an optical device capable of producing true-time delay(s) (TTD)(s) for phased array antennas. This TTD device uses a free-space approach consisting of a single microelectromechanical systems (MEMS) mirror array in a multiple reflection spherical mirror configuration based on the White cell. Divergence is avoided by periodic refocusing by the mirrors. By using the MEMS mirror to switch between paths of different lengths, time delays are generated. Six different delays in 1-ns increments were demonstrated by using the Texas Instruments Digital Micromirror Device® as the switching element. Losses of 1.6 to 5.2 dB per bounce and crosstalk of -27 dB were also measured, both resulting primarily from diffraction from holes in each pixel and the inter-pixel gaps of the MEMS.

  5. Memória

    OpenAIRE

    Carlos Alberto Mourão Júnior; Nicole Costa Faria

    2015-01-01

    ResumoEste artigo tem como objetivo central apresentar os processos de memória de maneira didática, proporcionando aos alunos e futuros pesquisadores um primeiro contato satisfatório com o tema. Já há algum tempo, tem sido observada a ocorrência de confusões conceituais e metodológicas no campo da neurociência cognitiva, tanto em relação à memória quanto em relação às outras funções psicológicas básicas. Neste ensaio, alguns conceitos principais são esclarecidos. É apresentada uma classificaç...

  6. Design of a hybrid-integrated MEMS scanning grating spectrometer

    Science.gov (United States)

    Pügner, Tino; Knobbe, Jens; Grüger, Heinrich; Schenk, Harald

    2011-10-01

    Optical MEMS (micro electro mechanical systems) have been used to reduce size, weight and costs of any kind of optical systems very successfully starting in the last decades. Scientists at Fraunhofer IPMS invented a resonant drive for 1-d and 2-d MEMS scanning mirror devices. Besides mirrors also scanning gratings have been realized. Now, rapidly growing new applications demand for enhanced functions and further miniaturization. This task cannot be solved by simply putting more functionality into the MEMS chip, for example grating and slit structures, but by three dimensional hybrid integration of the complete optical system into a stack of several functional substrates. Here we present the optical system design and realization strategy for a scanning grating spectrometer for the near infrared (NIR) range. First samples will be mounted from single components by a bonder tool (Finetech Fineplacer Femto) but the option of wafer assembly will be kept open for future developments. Extremely miniaturized NIR spectrometer could serve a wide variety of applications for handheld devices from food quality analysis to medical services or materials identification.

  7. Multilayer Active Shell Mirrors

    Science.gov (United States)

    Steeves, John

    This thesis presents a novel active mirror technology based on carbon fiber composites and replication manufacturing processes. Multiple additional layers are implemented into the structure in order to provide the reflective layer, actuation capabilities and electrode routing. The mirror is thin, lightweight, and has large actuation capabilities. These features, along with the associated manufacturing processes, represent a significant change in design compared to traditional optics. Structural redundancy in the form of added material or support structures is replaced by thin, unsupported lightweight substrates with large actuation capabilities. Several studies motivated by the desire to improve as-manufactured figure quality are performed. Firstly, imperfections in thin CFRP laminates and their effect on post-cure shape errors are studied. Numerical models are developed and compared to experimental measurements on flat laminates. Techniques to mitigate figure errors for thicker laminates are also identified. A method of properly integrating the reflective facesheet onto the front surface of the CFRP substrate is also presented. Finally, the effect of bonding multiple initially flat active plates to the backside of a curved CFRP substrate is studied. Figure deformations along with local surface defects are predicted and characterized experimentally. By understanding the mechanics behind these processes, significant improvements to the overall figure quality have been made. Studies related to the actuation response of the mirror are also performed. The active properties of two materials are characterized and compared. Optimal active layer thicknesses for thin surface-parallel schemes are determined. Finite element simulations are used to make predictions on shape correction capabilities, demonstrating high correctabiliity and stroke over low-order modes. The effect of actuator saturation is studied and shown to significantly degrade shape correction performance. The

  8. Miniaturized probe based on a microelectromechanical system mirror for multiphoton microscopy.

    Science.gov (United States)

    Jung, Woonggyu; Tang, Suo; McCormic, Daniel T; Xie, Tiquiang; Ahn, Yeh-Chan; Su, Jianping; Tomov, Ivan V; Krasieva, Tatiana B; Tromberg, Bruce J; Chen, Zhongping

    2008-06-15

    A factor that limits the use of multiphoton microscopy (MPM) in clinical and preclinical studies is the lack of a compact and flexible probe. We report on a miniaturized MPM probe employing a microelectromechanical system (MEMS) scanning mirror and a double-clad photonic crystal fiber (DCPCF). The use of a MEMS mirror and a DCPCF provides many advantages, such as size reduction, rapid and precise scanning, efficient delivery of short pulses, and high collection efficiency of fluorescent signals. The completed probe was 1 cm in outer diameter and 14 cm in length. The developed probe was integrated into an MPM system and used to image fluorescent beads, paper, and biological specimens.

  9. Modelling mirror aberrations in FEL oscillators using OPC

    NARCIS (Netherlands)

    van der Slot, Petrus J.M.; Karssenberg, J.G.; Boller, Klaus J.

    2007-01-01

    Several high power free-electron lasers (FELs) are currently under design, operational or being upgraded. One central issue is the beam outcoupling and mirror deformation due to absorbed power. Here we present an extension to the OPC code that allows it to model mirror distorions. We use this code

  10. Concept for a Novel Multi-Object Spectrograph using MEMS Technology

    Science.gov (United States)

    MacKenty, J. W.

    1997-12-01

    We present a conceptual design for a multi-object spectrograph using an an array of small scale mirrors implemented on a silicon chip. The placement of switchable mirrors in the focal plane permits the custom definition of slits with arbitrarily small separations. Unlike punch plate spectrographs, the use of microelectronic devices permits very rapid configuration of the slits and avoids the use of consumable materials. The enabling Micro-Electronics Mechanical Systems (MEMS) technology promises a broader availability of optical/mechanical devices with electronic interfaces. One example of such a MEMS device is the Texas Instruments Digital Micromirror Device (DMD) a 600 x 800 array of 16 micron square mirrors used in projection television displays. We have experimented with the DMD and discuss its potential application to astronomical spectrographs.

  11. Electromagnetic actuation in MEMS switches

    DEFF Research Database (Denmark)

    Oliveira Hansen, Roana Melina de; Mátéfi-Tempfli, Mária; Chemnitz, Steffen

    . Electromagnetic actuation is a very promising approach to operate such MEMS and Power MEMS devices, due to the long range, reproducible and strong forces generated by this method, among other advantages. However, the use of electromagnetic actuation in such devices requires the use of thick magnetic films, which...

  12. Topology optimized RF MEMS switches

    DEFF Research Database (Denmark)

    Philippine, M. A.; Zareie, H.; Sigmund, Ole

    2013-01-01

    Topology optimization is a rigorous and powerful method that should become a standard MEMS design tool - it can produce unique and non-intuitive designs that meet complex objectives and can dramatically improve the performance and reliability of MEMS devices. We present successful uses of topolog...

  13. DMD reliability: a MEMS success story

    Science.gov (United States)

    Douglass, Michael

    2003-01-01

    The Digital Micromirror Device (DMD) developed by Texas Instruments (TI) has made tremendous progress in both performance and reliability since it was first invented in 1987. From the first working concept of a bistable mirror, the DMD is now providing high-brightness, high-contrast, and high-reliability in over 1,500,000 projectors using Digital Light Processing technology. In early 2000, TI introduced the first DMD chip with a smaller mirror (14-micron pitch versus 17-micron pitch). This allowed a greater number of high-resolution DMD chips per wafer, thus providing an increased output capacity as well as the flexibility to use existing package designs. By using existing package designs, subsequent DMDs cost less as well as met our customers' demand for faster time to market. In recent years, the DMD achieved the status of being a commercially successful MEMS device. It reached this status by the efforts of hundreds of individuals working toward a common goal over many years. Neither textbooks nor design guidelines existed at the time. There was little infrastructure in place to support such a large endeavor. The knowledge we gained through our characterization and testing was all we had available to us through the first few years of development. Reliability was only a goal in 1992 when production development activity started; a goal that many throughout the industry and even within Texas Instruments doubted the DMD could achieve. The results presented in this paper demonstrate that we succeeded by exceeding the reliability goals.

  14. Fringe-tunable electrothermal Fresnel mirror for use in compact and high-speed diffusion sensor.

    Science.gov (United States)

    Kiuchi, Yuki; Taguchi, Yoshihiro; Nagasaka, Yuji

    2017-01-23

    This paper reports the development of an electrothermal microelectromechanical systems (MEMS) mirror with serpentine shape actuators. A micro Fresnel mirror with fringe-spacing tunability is required to realize a compact and high-speed diffusion sensor for biological samples whose diffusion coefficient changes significantly because of a conformational change. In this case, the measurement time-constant is dependent on the fringe-spacing and diffusion coefficient of the sample. In this study, a fringe-tunable MEMS mirror with an actuation voltage less than 10 V was developed. The characteristics of the fabricated mirror were investigated experimentally. A high-visibility optical interference fringe was successfully demonstrated using both an ultranarrow-linewidth solid-state laser and a low-cost compact laser diode. The experimental results demonstrated a distinct possibility of developing a measurement device using only simple and low-voltage optical components.

  15. Mems cost analysis from laboratory to industry

    CERN Document Server

    Freng, Ron Lawes

    2016-01-01

    The World of MEMS; Chapter 2: Basic Fabrication Processes; Chapter 3: Surface Microengineering. High Aspect Ratio Microengineering; Chapter 5: MEMS Testing; Chapter 6: MEMS Packaging. Clean Rooms, Buildings and Plant; Chapter 8: The MEMSCOST Spreadsheet; Chapter 9: Product Costs - Accelerometers. Product Costs - Microphones. MEMS Foundries. Financial Reporting and Analysis. Conclusions.

  16. MEMS cost analysis from laboratory to industry

    CERN Document Server

    Freng, Ron Lawes

    2016-01-01

    The World of MEMS; Chapter 2: Basic Fabrication Processes; Chapter 3: Surface Microengineering. High Aspect Ratio Microengineering; Chapter 5: MEMS Testing; Chapter 6: MEMS Packaging. Clean Rooms, Buildings and Plant; Chapter 8: The MEMSCOST Spreadsheet; Chapter 9: Product Costs - Accelerometers. Product Costs - Microphones. MEMS Foundries. Financial Reporting and Analysis. Conclusions.

  17. Integrated microphotonic-MEMS inertial sensors

    Science.gov (United States)

    Zandi, Kazem

    The objective of this thesis is to design, simulate, fabricate and characterize high sensitive low cost in-plane photonic-band-gap (PBG)-micro electromechanical systems (MEMS)-based miniature accelerometers and rotational rate sensors (gyroscopes) on a silicon-on-insulator (SOI) substrate in order to enable the integration of an array of two-axis of these sensors on a single SOI platform. Use of guided-wave optical devices integrated with MEMS on SOI for multichannel/multifunction sensor systems allows the use of multiple sensors to extend the measurement range and accuracy. This provides essential redundancy which makes long-term reliability in the space environment possible therefore reducing the possibility of system failure. The navigator microchip also represents the ability of accommodating diverse attitude and inertial sensors on the same microchip to eliminate the need of many separate sensors. The end product exhibits orders of magnitude reduction in system mass and size. Furthermore, redundancy improves the net performance and precision of the navigation measurement systems. Two classes of optical accelerometers/gyroscopes are considered in this thesis for application in smallsats navigation, one based on tunable Fabry-Perot (FP) filter, where the sensor is actuated by the applied acceleration providing a shift in the operating wavelength that varies linearly with the applied acceleration and the other one based on variable optical attenuator (VOA), where the sensor is actuated by the applied acceleration providing a linear change for small displacements around the waveguide propagation axis in the relative signal intensity with the applied acceleration. In the case of FP-based sensors, the FP microcavity consists of two distributed Bragg reflectors (DBR) in which one DBR mirror is attached to the proof mass of the system. As a consequence of acceleration/rotation, the relative displacement of the movable mirror with respect to the fixed mirror changes

  18. Mirror symmetry in the presence of branes

    Energy Technology Data Exchange (ETDEWEB)

    Mertens, Adrian

    2011-10-11

    This work deals with mirror symmetry for N=1 compactifications on compact Calabi-Yau threefolds with branes. The mayor tool is a combined deformation space for the Calabi-Yau and a hypersurface within it. Periods of this deformation space contain information about B-type branes within the hypersurface in addition to the usual closed string data. To study these periods we generalize techniques used in closed string mirror symmetry. We derive the Picard-Fuchs system and encode the information in extended toric polytopes. Solutions of the Picard-Fuchs equations give superpotentials for certain brane configurations. This is an efficient way to calculate superpotentials. The deformations we consider are massive for all branes with non trivial superpotential. Depending on a choice of a family of hypersurfaces, the superpotential of the effective low energy theory depends on different massive fields. A priori there is no reason for these fields to be lighter then other fields that are not included. We find however examples where the superpotential is nearly at. In these examples we use the Gauss-Manin connection on the combined deformation space to define an open string mirror map. We find instanton generated superpotentials of A-type branes. This gives predictions for Ooguri-Vafa invariants counting holomorphic disks that end on a Lagrangian brane on the Quintic. A second class of examples does not have preferred nearly massless deformations and different families of hypersurfaces can be used to calculate the same on-shell superpotential. We calculate examples of superpotentials for branes in Calabi-Yau manifolds with several moduli. The on-shell superpotentials are mapped to the mirror A-model to study the instanton expansion and to obtain predictions for disk invariants. The combined deformation spaces are equivalent to the quantum corrected Kaehler deformation spaces of certain non compact Calabi-Yau fourfolds. These fourfolds are fibrations of Calabi-Yau threefolds

  19. Mirror symmetry in the presence of branes

    International Nuclear Information System (INIS)

    Mertens, Adrian

    2011-01-01

    This work deals with mirror symmetry for N=1 compactifications on compact Calabi-Yau threefolds with branes. The mayor tool is a combined deformation space for the Calabi-Yau and a hypersurface within it. Periods of this deformation space contain information about B-type branes within the hypersurface in addition to the usual closed string data. To study these periods we generalize techniques used in closed string mirror symmetry. We derive the Picard-Fuchs system and encode the information in extended toric polytopes. Solutions of the Picard-Fuchs equations give superpotentials for certain brane configurations. This is an efficient way to calculate superpotentials. The deformations we consider are massive for all branes with non trivial superpotential. Depending on a choice of a family of hypersurfaces, the superpotential of the effective low energy theory depends on different massive fields. A priori there is no reason for these fields to be lighter then other fields that are not included. We find however examples where the superpotential is nearly at. In these examples we use the Gauss-Manin connection on the combined deformation space to define an open string mirror map. We find instanton generated superpotentials of A-type branes. This gives predictions for Ooguri-Vafa invariants counting holomorphic disks that end on a Lagrangian brane on the Quintic. A second class of examples does not have preferred nearly massless deformations and different families of hypersurfaces can be used to calculate the same on-shell superpotential. We calculate examples of superpotentials for branes in Calabi-Yau manifolds with several moduli. The on-shell superpotentials are mapped to the mirror A-model to study the instanton expansion and to obtain predictions for disk invariants. The combined deformation spaces are equivalent to the quantum corrected Kaehler deformation spaces of certain non compact Calabi-Yau fourfolds. These fourfolds are fibrations of Calabi-Yau threefolds

  20. Measurement of copper vapour laser-induced deformation of ...

    Indian Academy of Sciences (India)

    2014-02-14

    Feb 14, 2014 ... of dielectric-coated mirror, caused by an incident repetitive pulsed laser beam with high average power. Minimum measurable deformation of 17 nm is reported. Keywords. Michelson interferometer; interferogram; high reflectivity mirror; nanoscale deformation. PACS Nos 68.47.Mn; 42.79.–e. 1. Introduction.

  1. Integrated optical MEMS using through-wafer vias and bump-bonding.

    Energy Technology Data Exchange (ETDEWEB)

    McCormick, Frederick Bossert; Frederick, Scott K.

    2008-01-01

    This LDRD began as a three year program to integrate through-wafer vias, micro-mirrors and control electronics with high-voltage capability to yield a 64 by 64 array of individually controllable micro-mirrors on 125 or 250 micron pitch with piston, tip and tilt movement. The effort was a mix of R&D and application. Care was taken to create SUMMiT{trademark} (Sandia's ultraplanar, multilevel MEMS technology) compatible via and mirror processes, and the ultimate goal was to mate this MEMS fabrication product to a complementary metal-oxide semiconductor (CMOS) electronics substrate. Significant progress was made on the via and mirror fabrication and design, the attach process development as well as the electronics high voltage (30 volt) and control designs. After approximately 22 months, the program was ready to proceed with fabrication and integration of the electronics, final mirror array, and through wafer vias to create a high resolution OMEMS array with individual mirror electronic control. At this point, however, mission alignment and budget constraints reduced the last year program funding and redirected the program to help support the through-silicon via work in the Hyper-Temporal Sensors (HTS) Grand Challenge (GC) LDRD. Several months of investigation and discussion with the HTS team resulted in a revised plan for the remaining 10 months of the program. We planned to build a capability in finer-pitched via fabrication on thinned substrates along with metallization schemes and bonding techniques for very large arrays of high density interconnects (up to 2000 x 2000 vias). Through this program, Sandia was able to build capability in several different conductive through wafer via processes using internal and external resources, MEMS mirror design and fabrication, various bonding techniques for arrayed substrates, and arrayed electronics control design with high voltage capability.

  2. Mirror Neurons and Mirror-Touch Synesthesia.

    Science.gov (United States)

    Linkovski, Omer; Katzin, Naama; Salti, Moti

    2016-05-30

    Since mirror neurons were introduced to the neuroscientific community more than 20 years ago, they have become an elegant and intuitive account for different cognitive mechanisms (e.g., empathy, goal understanding) and conditions (e.g., autism spectrum disorders). Recently, mirror neurons were suggested to be the mechanism underlying a specific type of synesthesia. Mirror-touch synesthesia is a phenomenon in which individuals experience somatosensory sensations when seeing someone else being touched. Appealing as it is, careful delineation is required when applying this mechanism. Using the mirror-touch synesthesia case, we put forward theoretical and methodological issues that should be addressed before relying on the mirror-neurons account. © The Author(s) 2016.

  3. Parylene for MEMS applications

    Science.gov (United States)

    Yao, Tze-Jung

    The goal of this thesis is to utilize Parylene, a room-temperature chemical-vapor-deposited (CVD) polymer, for MicroElectroMechanical Systems (MEMS) applications. The identified unique properties of Parylene are used to fabricate various micromachining devices such as thermopneumatic microvalve, in-channel microflow restrictor, and electret microphones. First, the properties of Parylene as a MEMS material are reviewed. The electrical, thermal, surface, and mechanical properties are first compared with that of other materials and further studied specifically for MEMS applications. The high dielectric strength (determined as 250V/mum) of Parylene makes it suitable for use as an electrical insulation material. However, its high resistivity causes un-desired charging effects first described in polymer-based electrostatic devices. The undesired high pull-in voltage, "bounce-back," and "snap-down" effects caused by dielectric charging are studied. Second, to make Parylene as a surface-micromachined material, a process that overcomes the stiction problem has to be developed. Thus, a new technique that combines wet-acetone dissolution and dry BrF3 dry etching has developed to overcome the stiction problem, which prevents Parylene microstructures from freestanding. The devices of mm*mm size with high yield are demonstrated using this technology. A thermopneumatic microvalve with a corrugated silicone/Parylene composite membrane is designed, fabricated, and tested for gas flows of several slpm and inlet pressures of tens of psi. The lowest power consumption to turn off the gas flow is determined to be 73mW. A silicone-based microfluidic coupler, initially designed for microvalve packaging, is also demonstrated for its ability to connect the external macrofluidic world to microfluidic devices. The demonstrated "quick-connect" microfluidic coupler has low leakage, is reusable, and can maintain good seal up to 60 psi. An in-channel microflow restrictor is also demonstrated with

  4. Durable solar mirror films

    Energy Technology Data Exchange (ETDEWEB)

    O' Neill, Mark B.; Henderson, Andrew J.; Hebrink, Timothy J.; Katare, Rajesh K.; Jing, Naiyong; North, Diane; Peterson, Eric M.

    2017-02-14

    The present disclosure generally relates to durable solar mirror films, methods of making durable solar mirror films, and constructions including durable solar mirror films. In one embodiment, the present disclosure relates to a solar mirror film comprising: a multilayer optical film layer including having a coefficient of hygroscopic expansion of less than about 30 ppm per percent relative humidity; and a reflective layer having a coefficient of hygroscopic expansion.

  5. Ovenized microelectromechanical system (MEMS) resonator

    Science.gov (United States)

    Olsson, Roy H; Wojciechowski, Kenneth; Kim, Bongsang

    2014-03-11

    An ovenized micro-electro-mechanical system (MEMS) resonator including: a substantially thermally isolated mechanical resonator cavity; a mechanical oscillator coupled to the mechanical resonator cavity; and a heating element formed on the mechanical resonator cavity.

  6. Optically transduced MEMS magnetometer

    Science.gov (United States)

    Nielson, Gregory N; Langlois, Eric

    2014-03-18

    MEMS magnetometers with optically transduced resonator displacement are described herein. Improved sensitivity, crosstalk reduction, and extended dynamic range may be achieved with devices including a deflectable resonator suspended from the support, a first grating extending from the support and disposed over the resonator, a pair of drive electrodes to drive an alternating current through the resonator, and a second grating in the resonator overlapping the first grating to form a multi-layer grating having apertures that vary dimensionally in response to deflection occurring as the resonator mechanically resonates in a plane parallel to the first grating in the presence of a magnetic field as a function of the Lorentz force resulting from the alternating current. A plurality of such multi-layer gratings may be disposed across a length of the resonator to provide greater dynamic range and/or accommodate fabrication tolerances.

  7. MEMS digital parametric loudspeaker

    KAUST Repository

    Carreno, Armando Arpys Arevalo

    2016-03-23

    This paper reports on the design and fabrication of MEMS actuator arrays suitable for Digital Sound reconstruction and Parametric Directional Loudspeakers. Two distinct versions of the device were fabricated: one using the electrostatic principle actuation and the other one, the piezoelectric principle. Both versions used similar membrane dimensions, with a diameter of 500 μm. These devices are the smallest Micro-Machined Ultrasound Transducer (MUT) arrays that can be operated for both modes: Digital Sound Reconstruction and Parametric Loudspeaker. The chips consist of an array with 256 transducers, in a footprint of 12 mm by 12 mm. The total single chip size is: 2.3 cm by 2.3 cm, including the contact pads. © 2016 IEEE.

  8. Effects of Radiation on MEMS

    OpenAIRE

    Shea, Herbert

    2011-01-01

    The sensitivity of MEMS devices to radiation is reviewed, with an emphasis on radiation levels representative of space missions. While silicon and metals generally do not show mechanical degradation at the radiation levels encountered in most missions, MEMS devices have been reported to fail at doses of as few krad, corresponding to less than one year in most orbits. Radiation sensitivity is linked primarily to the impact on device operation of radiation-induced trapped charge in dielectrics...

  9. Characterization of MEMS FTIR spectrometer

    Science.gov (United States)

    Khalil, Diaa; Sabry, Yasser; Omran, Haitham; Medhat, Mostafa; Hafez, Amr; Saadany, Bassam

    2011-03-01

    In this work we present the full characterization of an optical MEMS Fourier Transform Infra Red FTIR spectrometer fabricated by Deep Reactive Ion Etching DRIE Technology on Silicon substrate. Both electrical and optical properties of the spectrometer are measured. The presented techniques allows to build an engineering model for the spectrometer and to predict its main specifications taking into account the specificity of the MEMS technology used in the spectrometer fabrication.

  10. Integration of optoelectronics and MEMS by free-space micro-optics

    Energy Technology Data Exchange (ETDEWEB)

    WARREN,MIAL E.; SPAHN,OLGA B.; SWEATT,WILLIAM C.; SHUL,RANDY J.; WENDT,JOEL R.; VAWTER,GREGORY A.; KRYGOWSKI,TOM W.; REYES,DAVID NMN; RODGERS,M. STEVEN; SNIEGOWSKI,JEFFRY J.

    2000-06-01

    This report represents the completion of a three-year Laboratory-Directed Research and Development (LDRD) program to investigate combining microelectromechanical systems (MEMS) with optoelectronic components as a means of realizing compact optomechanical subsystems. Some examples of possible applications are laser beam scanning, switching and routing and active focusing, spectral filtering or shattering of optical sources. The two technologies use dissimilar materials with significant compatibility problems for a common process line. This project emphasized a hybrid approach to integrating optoelectronics and MEMS. Significant progress was made in developing processing capabilities for adding optical function to MEMS components, such as metal mirror coatings and through-vias in the substrate. These processes were used to demonstrate two integration examples, a MEMS discriminator driven by laser illuminated photovoltaic cells and a MEMS shutter or chopper. Another major difficulty with direct integration is providing the optical path for the MEMS components to interact with the light. The authors explored using folded optical paths in a transparent substrate to provide the interconnection route between the components of the system. The components can be surface-mounted by flip-chip bonding to the substrate. Micro-optics can be fabricated into the substrate to reflect and refocus the light so that it can propagate from one device to another and them be directed out of the substrate into free space. The MEMS components do not require the development of transparent optics and can be completely compatible with the current 5-level polysilicon process. They report progress on a MEMS-based laser scanner using these concepts.

  11. MEMS for automotive and aerospace applications

    CERN Document Server

    Kraft, Michael

    2013-01-01

    MEMS for automotive and aerospace applications reviews the use of Micro-Electro-Mechanical-Systems (MEMS) in developing solutions to the unique challenges presented by the automotive and aerospace industries.Part one explores MEMS for a variety of automotive applications. The role of MEMS in passenger safety and comfort, sensors for automotive vehicle stability control applications and automotive tire pressure monitoring systems are considered, along with pressure and flow sensors for engine management, and RF MEMS for automotive radar sensors. Part two then goes on to explore MEMS for

  12. Mirror machine reactors

    International Nuclear Information System (INIS)

    Carlson, G.A.; Moir, R.W.

    1976-01-01

    Recent mirror reactor conceptual design studies are described. Considered in detail is the design of ''standard'' Yin-Yang fusion power reactors with classical and enhanced confinement. It is shown that to be economically competitive with estimates for other future energy sources, mirror reactors require a considerable increase in Q, or major design simplifications, or preferably both. These improvements may require a departure from the ''standard'' configuration. Two attractive possibilities, both of which would use much of the same physics and technology as the ''standard'' mirror, are the field reversed mirror and the end-stoppered mirror

  13. Design and modeling of a precision 6 DOF MEMS-based parallel kinematic TEM sample manipulator

    NARCIS (Netherlands)

    Brouwer, Dannis Michel; de Jong, B.R.; Soemers, Herman

    2006-01-01

    A design for a 6 Degree-of-freedom precision MEMS-based manipulator for a TEM will is presented. The elastic mechanism is designed and modeled with the specific design considerations regarding kinematic constraint design and elastic energy storage. The typical relatively large deformations of

  14. 3-D coupled electric mechanics for MEMS: Applications of COSOLVE-EM

    NARCIS (Netherlands)

    Gilbert, J.R.; Legtenberg, R.; Legtenberg, Rob; Senturia, S.D.

    1995-01-01

    Micro-electro-mechanical systems (MEMS) are often designed on scales at which electrostatic forces are capable of moving or deforming the parts of the system. In this regime accurate prediction of device behavior may require 3D coupled simulations between the electrostatic and mechanical domains. We

  15. Piezoelectric MEMS: Ferroelectric thin films for MEMS applications

    Science.gov (United States)

    Kanno, Isaku

    2018-04-01

    In recent years, piezoelectric microelectromechanical systems (MEMS) have attracted attention as next-generation functional microdevices. Typical applications of piezoelectric MEMS are micropumps for inkjet heads or micro-gyrosensors, which are composed of piezoelectric Pb(Zr,Ti)O3 (PZT) thin films and have already been commercialized. In addition, piezoelectric vibration energy harvesters (PVEHs), which are regarded as one of the key devices for Internet of Things (IoT)-related technologies, are promising future applications of piezoelectric MEMS. Significant features of piezoelectric MEMS are their simple structure and high energy conversion efficiency between mechanical and electrical domains even on the microscale. The device performance strongly depends on the function of the piezoelectric thin films, especially on their transverse piezoelectric properties, indicating that the deposition of high-quality piezoelectric thin films is a crucial technology for piezoelectric MEMS. On the other hand, although the difficulty in measuring the precise piezoelectric coefficients of thin films is a serious obstacle in the research and development of piezoelectric thin films, a simple unimorph cantilever measurement method has been proposed to obtain precise values of the direct or converse transverse piezoelectric coefficient of thin films, and recently this method has become to be the standardized testing method. In this article, I will introduce fundamental technologies of piezoelectric thin films and related microdevices, especially focusing on the deposition of PZT thin films and evaluation methods for their transverse piezoelectric properties.

  16. CMOS MEMS Fabrication Technologies and Devices

    Directory of Open Access Journals (Sweden)

    Hongwei Qu

    2016-01-01

    Full Text Available This paper reviews CMOS (complementary metal-oxide-semiconductor MEMS (micro-electro-mechanical systems fabrication technologies and enabled micro devices of various sensors and actuators. The technologies are classified based on the sequence of the fabrication of CMOS circuitry and MEMS elements, while SOI (silicon-on-insulator CMOS MEMS are introduced separately. Introduction of associated devices follows the description of the respective CMOS MEMS technologies. Due to the vast array of CMOS MEMS devices, this review focuses only on the most typical MEMS sensors and actuators including pressure sensors, inertial sensors, frequency reference devices and actuators utilizing different physics effects and the fabrication processes introduced. Moreover, the incorporation of MEMS and CMOS is limited to monolithic integration, meaning wafer-bonding-based stacking and other integration approaches, despite their advantages, are excluded from the discussion. Both competitive industrial products and state-of-the-art research results on CMOS MEMS are covered.

  17. Conceptual MEMS Devices for a Redeployable Antenna

    National Research Council Canada - National Science Library

    Miller, Virginia

    2007-01-01

    Micro-Electro-Mechanical Systems (MEMS) are becoming an integral part of our lives through a wide range of applications, including MEMS accelerators for air bag deployment in vehicles, micromirrors in projection devices, and various...

  18. Endoscopic swept-source optical coherence tomography based on a two-axis microelectromechanical system mirror

    Science.gov (United States)

    Wang, Donglin; Fu, Linlai; Wang, Xin; Gong, Zhongjian; Samuelson, Sean; Duan, Can; Jia, Hongzhi; Ma, Jun Shan; Xie, Huikai

    2013-08-01

    A microelectromechanical system (MEMS) mirror based endoscopic swept-source optical coherence tomography (SS-OCT) system that can perform three-dimensional (3-D) imaging at high speed is reported. The key component enabling 3-D endoscopic imaging is a two-axis MEMS scanning mirror which has a 0.8×0.8 mm2 mirror plate and a 1.6×1.4 mm2 device footprint. The diameter of the endoscopic probe is only 3.5 mm. The imaging rate of the SS-OCT system is 50 frames/s. OCT images of both human suspicious oral leukoplakia tissue and normal buccal mucosa were taken in vivo and compared. The OCT imaging result agrees well with the histopathological analysis.

  19. H∞ Robust Control of a Large-Piston MEMS Micromirror for Compact Fourier Transform Spectrometer Systems.

    Science.gov (United States)

    Chen, Huipeng; Li, Mengyuan; Zhang, Yi; Xie, Huikai; Chen, Chang; Peng, Zhangming; Su, Shaohui

    2018-02-08

    Incorporating linear-scanning micro-electro-mechanical systems (MEMS) micromirrors into Fourier transform spectral acquisition systems can greatly reduce the size of the spectrometer equipment, making portable Fourier transform spectrometers (FTS) possible. How to minimize the tilting of the MEMS mirror plate during its large linear scan is a major problem in this application. In this work, an FTS system has been constructed based on a biaxial MEMS micromirror with a large-piston displacement of 180 μm, and a biaxial H∞ robust controller is designed. Compared with open-loop control and proportional-integral-derivative (PID) closed-loop control, H∞ robust control has good stability and robustness. The experimental results show that the stable scanning displacement reaches 110.9 μm under the H∞ robust control, and the tilting angle of the MEMS mirror plate in that full scanning range falls within ±0.0014°. Without control, the FTS system cannot generate meaningful spectra. In contrast, the FTS yields a clean spectrum with a full width at half maximum (FWHM) spectral linewidth of 96 cm -1 under the H∞ robust control. Moreover, the FTS system can maintain good stability and robustness under various driving conditions.

  20. H∞ Robust Control of a Large-Piston MEMS Micromirror for Compact Fourier Transform Spectrometer Systems

    Science.gov (United States)

    Li, Mengyuan; Zhang, Yi; Chen, Chang; Peng, Zhangming; Su, Shaohui

    2018-01-01

    Incorporating linear-scanning micro-electro-mechanical systems (MEMS) micromirrors into Fourier transform spectral acquisition systems can greatly reduce the size of the spectrometer equipment, making portable Fourier transform spectrometers (FTS) possible. How to minimize the tilting of the MEMS mirror plate during its large linear scan is a major problem in this application. In this work, an FTS system has been constructed based on a biaxial MEMS micromirror with a large-piston displacement of 180 μm, and a biaxial H∞ robust controller is designed. Compared with open-loop control and proportional-integral-derivative (PID) closed-loop control, H∞ robust control has good stability and robustness. The experimental results show that the stable scanning displacement reaches 110.9 μm under the H∞ robust control, and the tilting angle of the MEMS mirror plate in that full scanning range falls within ±0.0014°. Without control, the FTS system cannot generate meaningful spectra. In contrast, the FTS yields a clean spectrum with a full width at half maximum (FWHM) spectral linewidth of 96 cm−1 under the H∞ robust control. Moreover, the FTS system can maintain good stability and robustness under various driving conditions. PMID:29419765

  1. H∞ Robust Control of a Large-Piston MEMS Micromirror for Compact Fourier Transform Spectrometer Systems

    Directory of Open Access Journals (Sweden)

    Huipeng Chen

    2018-02-01

    Full Text Available Incorporating linear-scanning micro-electro-mechanical systems (MEMS micromirrors into Fourier transform spectral acquisition systems can greatly reduce the size of the spectrometer equipment, making portable Fourier transform spectrometers (FTS possible. How to minimize the tilting of the MEMS mirror plate during its large linear scan is a major problem in this application. In this work, an FTS system has been constructed based on a biaxial MEMS micromirror with a large-piston displacement of 180 μm, and a biaxial H∞ robust controller is designed. Compared with open-loop control and proportional-integral-derivative (PID closed-loop control, H∞ robust control has good stability and robustness. The experimental results show that the stable scanning displacement reaches 110.9 μm under the H∞ robust control, and the tilting angle of the MEMS mirror plate in that full scanning range falls within ±0.0014°. Without control, the FTS system cannot generate meaningful spectra. In contrast, the FTS yields a clean spectrum with a full width at half maximum (FWHM spectral linewidth of 96 cm−1 under the H∞ robust control. Moreover, the FTS system can maintain good stability and robustness under various driving conditions.

  2. Modeling nonlinearities in MEMS oscillators.

    Science.gov (United States)

    Agrawal, Deepak K; Woodhouse, Jim; Seshia, Ashwin A

    2013-08-01

    We present a mathematical model of a microelectromechanical system (MEMS) oscillator that integrates the nonlinearities of the MEMS resonator and the oscillator circuitry in a single numerical modeling environment. This is achieved by transforming the conventional nonlinear mechanical model into the electrical domain while simultaneously considering the prominent nonlinearities of the resonator. The proposed nonlinear electrical model is validated by comparing the simulated amplitude-frequency response with measurements on an open-loop electrically addressed flexural silicon MEMS resonator driven to large motional amplitudes. Next, the essential nonlinearities in the oscillator circuit are investigated and a mathematical model of a MEMS oscillator is proposed that integrates the nonlinearities of the resonator. The concept is illustrated for MEMS transimpedance-amplifier- based square-wave and sine-wave oscillators. Closed-form expressions of steady-state output power and output frequency are derived for both oscillator models and compared with experimental and simulation results, with a good match in the predicted trends in all three cases.

  3. Nanoscale Deformable Optics

    Science.gov (United States)

    Strauss, Karl F.; Sheldon, Douglas J.

    2011-01-01

    Several missions and instruments in the conceptual design phase rely on the technique of interferometry to create detectable fringe patterns. The intimate emplacement of reflective material upon electron device cells based upon chalcogenide material technology permits high-speed, predictable deformation of the reflective surface to a subnanometer or finer resolution with a very high degree of accuracy. In this innovation, a layer of reflective material is deposited upon a wafer containing (perhaps in the millions) chalcogenic memory cells with the reflective material becoming the front surface of a mirror and the chalcogenic material becoming a means of selectively deforming the mirror by the application of heat to the chalcogenic material. By doing so, the mirror surface can deform anywhere from nil to nanometers in spots the size of a modern day memory cell, thereby permitting realtime tuning of mirror focus and reflectivity to mitigate aberrations caused elsewhere in the optical system. Modern foundry methods permit the design and manufacture of individual memory cells having an area of or equal to the Feature (F) size of the design (assume 65 nm). Fabrication rules and restraints generally require the instantiation of one memory cell to another no closer than 1.5 F, or, for this innovation, 90 nm from its neighbor in any direction. Chalcogenide is a semiconducting glass compound consisting of a combination of chalcogen ions, the ratios of which vary according to properties desired. It has been shown that the application of heat to cells of chalcogenic material cause a large alteration in resistance to the range of 4 orders of magnitude. It is this effect upon which chalcogenidebased commercial memories rely. Upon removal of the heat source, the chalcogenide rapidly cools and remains frozen in the excited state. It has also been shown that the chalcogenide expands in volume because of the applied heat, meaning that the coefficient of expansion of chalcogenic

  4. Structured synthesis of MEMS using evolutionary approaches

    DEFF Research Database (Denmark)

    Fan, Zhun; Wang, Jiachuan; Achiche, Sofiane

    2008-01-01

    In this paper, we discuss the hierarchy that is involved in a typical MEMS design and how evolutionary approaches can be used to automate the hierarchical synthesis process for MEMS. The paper first introduces the flow of a structured MEMS design process and emphasizes that system-level lumped...... the integrated design automation idea using these evolutionary approaches....

  5. Electrostatic MEMS devices with high reliability

    Science.gov (United States)

    Goldsmith, Charles L; Auciello, Orlando H; Sumant, Anirudha V; Mancini, Derrick C; Gudeman, Chris; Sampath, Suresh; Carlilse, John A; Carpick, Robert W; Hwang, James

    2015-02-24

    The present invention provides for an electrostatic microelectromechanical (MEMS) device comprising a dielectric layer separating a first conductor and a second conductor. The first conductor is moveable towards the second conductor, when a voltage is applied to the MEMS device. The dielectric layer recovers from dielectric charging failure almost immediately upon removal of the voltage from the MEMS device.

  6. A six degrees of freedom mems manipulator

    NARCIS (Netherlands)

    de Jong, B.R.

    2006-01-01

    This thesis reports about a six degrees of freedom (DOF) precision manipulator in MEMS, concerning concept generation for the manipulator followed by design and fabrication (of parts) of the proposed manipulation concept in MEMS. Researching the abilities of 6 DOF precision manipulation in MEMS is

  7. Modular packaging concept for MEMS and MOEMS

    Science.gov (United States)

    Stenchly, Vanessa; Reinert, Wolfgang; Quenzer, Hans-Joachim

    2017-11-01

    Wherever technical systems detect objects in their environment or interact with people, optical devices may play an important role. Light can be relatively easily produced and spatially and temporally modulated. Laser can project sharp images over long distances or cut materials in short distances. Depending on the wavelength an invisible scanning in near infrared for gesture recognition is possible as well as a projection of brilliant colour images. For several years, the Fraunhofer ISIT develops Opto-Packaging processes based on the viscous reshaping of glass wafers: First, hermetically sealed laser micro-mirror scanners WLP with inclined windows deflect in the central light reflex of the window out of the image area. Second, housing with lateral light exit permits hermetic sealing of edge-emitting lasers for highest reliability and durability. Such systems are currently experiencing an extremely high interest of the industry in all segments, from consumer to automotive through to materials processing. Our modular Opto-Packaging platform enables fast product developments. Housing for opto mechanical MEMS devices are equipped with inclined windows to minimize distortion, stray light and reflection losses. The hot viscous glass forming technology is also applied to functionalized substrate wafers which possess areas with high heat dissipation in addition to thermally insulating areas. Electrical contacts may be realized with metal filled vias or TGV (Through Glass Vias). The modular system reduces the development times for new, miniaturized optical systems so that manufacturers can focus on the essentials in their development, namely their product functionalities.

  8. Differentially-driven MEMS spatial light modulator

    Science.gov (United States)

    Stappaerts, Eddy A.

    2004-09-14

    A MEMS SLM and an electrostatic actuator associated with a pixel in an SLM. The actuator has three electrodes: a lower electrode; an upper electrode fixed with respect to the lower electrode; and a center electrode suspended and actuable between the upper and lower electrodes. The center electrode is capable of resiliently-biasing to restore the center electrode to a non-actuated first equilibrium position, and a mirror is operably connected to the center electrode. A first voltage source provides a first bias voltage across the lower and center electrodes and a second voltage source provides a second bias voltage across the upper and center electrodes, with the first and second bias voltages determining the non-actuated first equilibrium position of the center electrode. A third voltage source provides a variable driver voltage across one of the lower/center and upper/center electrode pairs in series with the corresponding first or second bias voltage, to actuate the center electrode to a dynamic second equilibrium position.

  9. MEMS linear and nonlinear statics and dynamics

    CERN Document Server

    Younis, Mohammad I

    2011-01-01

    MEMS Linear and Nonlinear Statics and Dynamics presents the necessary analytical and computational tools for MEMS designers to model and simulate most known MEMS devices, structures, and phenomena. This book also provides an in-depth analysis and treatment of the most common static and dynamic phenomena in MEMS that are encountered by engineers. Coverage also includes nonlinear modeling approaches to modeling various MEMS phenomena of a nonlinear nature, such as those due to electrostatic forces, squeeze-film damping, and large deflection of structures. The book also: Includes examples of nume

  10. Lessons learned from nanoscale specimens tested by MEMS-based apparatus

    Science.gov (United States)

    Elhebeary, Mohamed; Saif, M. Taher A.

    2017-06-01

    The last two decades were marked by the innovative synthesis of nanomaterials and devices. The success of these devices hinges on the mechanical properties of nanomaterials and an understanding of their deformation and failure mechanisms. Many novel testing techniques have been developed to test materials at small scale. This paper reviews the state-of-the-art microelectromechanical systems (MEMS) apparatus developed to characterize materials at nanoscale, and the key insights gained on structure-property relations of materials through these characterizations. Finally, new applications of MEMS in testing living materials, such as tissues and cells, for disease diagnosis and prognosis are discussed.

  11. Lessons learned from nanoscale specimens tested by MEMS-based apparatus

    International Nuclear Information System (INIS)

    Elhebeary, Mohamed; Saif, M Taher A

    2017-01-01

    The last two decades were marked by the innovative synthesis of nanomaterials and devices. The success of these devices hinges on the mechanical properties of nanomaterials and an understanding of their deformation and failure mechanisms. Many novel testing techniques have been developed to test materials at small scale. This paper reviews the state-of-the-art microelectromechanical systems (MEMS) apparatus developed to characterize materials at nanoscale, and the key insights gained on structure-property relations of materials through these characterizations. Finally, new applications of MEMS in testing living materials, such as tissues and cells, for disease diagnosis and prognosis are discussed. (topical review)

  12. Of light, of MEMS: Optical MEMS in telecommunications and beyond

    Indian Academy of Sciences (India)

    Abstract. The burst of the Internet bubble in 2000 has severely quenched the pace of development in the optical MEMS field. However, it is now clear that this field is again set to move forward as not only telecommunication but many other industries are benefiting from its application. We describe in this paper some of.

  13. Corticospinal mirror neurons

    Science.gov (United States)

    Kraskov, A.; Philipp, R.; Waldert, S.; Vigneswaran, G.; Quallo, M. M.; Lemon, R. N.

    2014-01-01

    Here, we report the properties of neurons with mirror-like characteristics that were identified as pyramidal tract neurons (PTNs) and recorded in the ventral premotor cortex (area F5) and primary motor cortex (M1) of three macaque monkeys. We analysed the neurons’ discharge while the monkeys performed active grasp of either food or an object, and also while they observed an experimenter carrying out a similar range of grasps. A considerable proportion of tested PTNs showed clear mirror-like properties (52% F5 and 58% M1). Some PTNs exhibited ‘classical’ mirror neuron properties, increasing activity for both execution and observation, while others decreased their discharge during observation (‘suppression mirror-neurons’). These experiments not only demonstrate the existence of PTNs as mirror neurons in M1, but also reveal some interesting differences between M1 and F5 mirror PTNs. Although observation-related changes in the discharge of PTNs must reach the spinal cord and will include some direct projections to motoneurons supplying grasping muscles, there was no EMG activity in these muscles during action observation. We suggest that the mirror neuron system is involved in the withholding of unwanted movement during action observation. Mirror neurons are differentially recruited in the behaviour that switches rapidly between making your own movements and observing those of others. PMID:24778371

  14. Advanced Mirror Technology Development

    Science.gov (United States)

    Stahl, H. Philip

    2017-01-01

    The Advanced Mirror Technology Development (AMTD) project matures critical technologies required to enable ultra-stable 4-m-or-larger monolithic or segmented ultraviolet, optical, and infrared (UVOIR) space telescope primary-mirror assemblies for general astrophysics and ultra-high-contrast observations of exoplanets.

  15. Corticospinal mirror neurons.

    Science.gov (United States)

    Kraskov, A; Philipp, R; Waldert, S; Vigneswaran, G; Quallo, M M; Lemon, R N

    2014-01-01

    Here, we report the properties of neurons with mirror-like characteristics that were identified as pyramidal tract neurons (PTNs) and recorded in the ventral premotor cortex (area F5) and primary motor cortex (M1) of three macaque monkeys. We analysed the neurons' discharge while the monkeys performed active grasp of either food or an object, and also while they observed an experimenter carrying out a similar range of grasps. A considerable proportion of tested PTNs showed clear mirror-like properties (52% F5 and 58% M1). Some PTNs exhibited 'classical' mirror neuron properties, increasing activity for both execution and observation, while others decreased their discharge during observation ('suppression mirror-neurons'). These experiments not only demonstrate the existence of PTNs as mirror neurons in M1, but also reveal some interesting differences between M1 and F5 mirror PTNs. Although observation-related changes in the discharge of PTNs must reach the spinal cord and will include some direct projections to motoneurons supplying grasping muscles, there was no EMG activity in these muscles during action observation. We suggest that the mirror neuron system is involved in the withholding of unwanted movement during action observation. Mirror neurons are differentially recruited in the behaviour that switches rapidly between making your own movements and observing those of others.

  16. Generalized Magnetic Mirrors.

    Science.gov (United States)

    Liu, Wei

    2017-09-22

    We propose generalized magnetic mirrors that can be achieved by excitations of sole electric resonances. Conventional approaches to obtain magnetic mirrors rely heavily on exciting the fundamental magnetic dipoles, whereas here we reveal that, besides magnetic resonances, electric resonances of higher orders can be also employed to obtain highly efficient magnetic mirrors. Based on the electromagnetic duality, it is also shown that electric mirrors can be achieved by exciting magnetic resonances. We provide direct demonstrations of the generalized mirrors proposed in a simple system of a one-dimensional periodic array of all-dielectric wires, which may shed new light on many advanced fields of photonics related to resonant multipolar excitations and interferences.

  17. Mechanical analysis on magnesium alloy rotating mirror for ultra-high-speed camera

    Science.gov (United States)

    Li, Chunbo; Liu, Minqiu; Ren, Xikui; Du, Chenlin; Huang, Hongbin; Ruan, Shuangchen

    2018-03-01

    Rotating mirror is not only as an imaging element in optical path of ultra-high speed camera, where imaging quality is affected by surface quality and plane deformation of the rotating mirror, but also as an element to implement ultra-high speed, because performances of the ultra-high-speed camera system are mainly dependent on the static and dynamic mechanical properties of the rotating mirror. In this paper, the static and dynamic properties of magnesium alloy rotating mirror with equilateral-triangle cross-sections were investigated by theoretically and numerically method. At the speed of 2×105 rpm, the maximum lateral deformations of the mirror facet with width 17.32 mm and length 40 mm is 2.476 μm. The maximum von Mises stress is 35.1 MPa. The deformation and stress are less than that of aluminum alloy rotating mirror, which has been successfully applied in many types of RM for ultra-high speed cameras. The first three frequencies of magnesium alloy rotating mirror are 9,539.9 Hz, 9,540.9 Hz and 12,726.0 Hz, respectively. While the first three frequencies of aluminium alloy rotating-mirror are 9,683.9 Hz, 9,685.2 Hz and 11,016.0 Hz. From which it is preliminarily shown that a magnesium alloy rotating mirror can be used as replacement for an aluminium alloy rotating mirror in ultra-high-speed camera.

  18. Modeling of rf MEMS switches

    Science.gov (United States)

    Robertson, Barbara; Ho, Fat D.; Hudson, Tracy D.

    2001-10-01

    The microelectromechanical system (MEMS) switch offers many benefits in radio frequency (RF) applications. These benefits include low insertion loss, high quality factor (Q), low power, RF isolation, and low cost. The ability to manufacture mechanical switches on a chip with electronics can lead to higher functionality, such as single-chip arrays, and smart switches. The MEMS switch is also used as a building block in devices such as phase shifters, filters, and switchable antenna elements. The MEMS designer needs models of these basic elements in order to incorporate them into their applications. The objective of this effort is to develop lumped element models for MEMS RF switches, which are incorporated into a CAD software. Tanner Research Inc.'s Electronic Design Automation (EDA) software is being used to develop a suite of mixed-signal RF switch models. The suite will include switches made from cantilever beams and fixed-fixed beams. The switches may be actuated by electrostatic, piezoelectric or electromagnetic forces. The effort presented in this paper concentrates on switches actuated by electrostatic forces. The lumped element models use a current-force electrical-mechanical analogy. Finite element modeling and device testing will be used to verify the Tanner models. The effects of materials, geometries, temperature, fringing fields, and mounting geometries are considered.

  19. In-plane deeply-etched optical MEMS notch filter with high-speed tunability

    Science.gov (United States)

    Sabry, Yasser M.; Eltagoury, Yomna M.; Shebl, Ahmed; Soliman, Mostafa; Sadek, Mohamed; Khalil, Diaa

    2015-12-01

    Notch filters are used in spectroscopy, multi-photon microscopy, fluorescence instrumentation, optical sensors and other life science applications. One type of notch filter is based on a fiber-coupled Fabry-Pérot cavity, which is formed by a reflector (external mirror) facing a dielectric-coated end of an optical fiber. Tailoring this kind of optical filter for different applications is possible because the external mirror has fewer mechanical and optical constraints. In this paper we present optical modeling and implementation of a fiber-coupled Fabry-Pérot filter based on dielectric-coated optical fiber inserted into a micromachined fiber groove facing a metallized micromirror, which is driven by a high-speed MEMS actuator. The optical MEMS chip is fabricated using deep reactive ion etching (DRIE) technology on a silicon on insulator wafer, where the optical axis is parallel to the substrate (in-plane) and the optical/mechanical components are self-aligned by the photolithographic process. The DRIE etching depth is 150 μm, chosen to increase the micromirror optical throughput and improving the out-of-plane stiffness of the MEMS actuator. The MEMS actuator type is closing-gap, while its quality factor is almost doubled by slotting the fixed plate. A low-finesse Fabry-Pérot interferometer is formed by the metallized surface of the micromirror and a cleaved end of a standard single-mode fiber, for characterization of the MEMS actuator stroke and resonance frequency. The actuator achieves a travel distance of 800 nm at a resonance frequency of 89.9 kHz. The notch filter characteristics were measured using an optical spectrum analyzer, and the filter exhibits a free spectral range up to 100 nm and a notch rejection ratio up to 20 dB around a wavelength of 1300 nm. The presented device provides batch processing and low-cost production of the filter.

  20. Measurement of the Earth tides with a MEMS gravimeter.

    Science.gov (United States)

    Middlemiss, R P; Samarelli, A; Paul, D J; Hough, J; Rowan, S; Hammond, G D

    2016-03-31

    The ability to measure tiny variations in the local gravitational acceleration allows, besides other applications, the detection of hidden hydrocarbon reserves, magma build-up before volcanic eruptions, and subterranean tunnels. Several technologies are available that achieve the sensitivities required for such applications (tens of microgal per hertz(1/2)): free-fall gravimeters, spring-based gravimeters, superconducting gravimeters, and atom interferometers. All of these devices can observe the Earth tides: the elastic deformation of the Earth's crust as a result of tidal forces. This is a universally predictable gravitational signal that requires both high sensitivity and high stability over timescales of several days to measure. All present gravimeters, however, have limitations of high cost (more than 100,000 US dollars) and high mass (more than 8 kilograms). Here we present a microelectromechanical system (MEMS) device with a sensitivity of 40 microgal per hertz(1/2) only a few cubic centimetres in size. We use it to measure the Earth tides, revealing the long-term stability of our instrument compared to any other MEMS device. MEMS accelerometers--found in most smart phones--can be mass-produced remarkably cheaply, but none are stable enough to be called a gravimeter. Our device has thus made the transition from accelerometer to gravimeter. The small size and low cost of this MEMS gravimeter suggests many applications in gravity mapping. For example, it could be mounted on a drone instead of low-flying aircraft for distributed land surveying and exploration, deployed to monitor volcanoes, or built into multi-pixel density-contrast imaging arrays.

  1. Classical mirror symmetry

    CERN Document Server

    Jinzenji, Masao

    2018-01-01

    This book furnishes a brief introduction to classical mirror symmetry, a term that denotes the process of computing Gromov–Witten invariants of a Calabi–Yau threefold by using the Picard–Fuchs differential equation of period integrals of its mirror Calabi–Yau threefold. The book concentrates on the best-known example, the quintic hypersurface in 4-dimensional projective space, and its mirror manifold. First, there is a brief review of the process of discovery of mirror symmetry and the striking result proposed in the celebrated paper by Candelas and his collaborators. Next, some elementary results of complex manifolds and Chern classes needed for study of mirror symmetry are explained. Then the topological sigma models, the A-model and the B-model, are introduced. The classical mirror symmetry hypothesis is explained as the equivalence between the correlation function of the A-model of a quintic hyper-surface and that of the B-model of its mirror manifold. On the B-model side, the process of construct...

  2. Mirror plasma apparatus

    International Nuclear Information System (INIS)

    Moir, R.W.

    1981-01-01

    A mirror plasma apparatus which utilizes shielding by arc discharge to form a blanket plasma and lithium walls to reduce neutron damage to the wall of the apparatus. An embodiment involves a rotating liquid lithium blanket for a tandem mirror plasma apparatus wherein the first wall of the central mirror cell is made of liquid lithium which is spun with angular velocity great enough to keep the liquid lithium against the first material wall, a blanket plasma preventing the lithium vapor from contaminating the plasma

  3. Mesmerising mirror neurons.

    Science.gov (United States)

    Heyes, Cecilia

    2010-06-01

    Mirror neurons have been hailed as the key to understanding social cognition. I argue that three currents of thought-relating to evolution, atomism and telepathy-have magnified the perceived importance of mirror neurons. When they are understood to be a product of associative learning, rather than an adaptation for social cognition, mirror neurons are no longer mesmerising, but they continue to raise important questions about both the psychology of science and the neural bases of social cognition. Copyright 2010 Elsevier Inc. All rights reserved.

  4. Optimization design for the supporting system of 5m collimator primary mirror

    Science.gov (United States)

    Guan, Shaohua; Ma, Tianmeng; Zhang, Ming

    2016-10-01

    Primary mirror is an important component of collimator. The surface figure error of primary mirror is a critical factor affecting the imaging quality of collimator. Besides, the support system of primary mirror of collimator must be steady, while collimator need be moved safely as an elementary optical measuring tool. The support system of the primary mirror is composed of axial support and lateral support. Due to the axis of the primary mirror is horizontal when collimator working, the lateral support of the primary mirror has a far greater impact on the figure error of the primary mirror. In this paper, static structure analysis with finite element method is carried out for a 5m collimator primary mirror with V-block support under gravity load. With the analysis, the relationship between the structure parameters in primary mirror V-block support and the deformation of the primary mirror is built. With this relationship, the optimization parameters are found out to reduce the gravity deformation of the primary mirror.

  5. [Mirror behaviors in dementia: the many mirror signs].

    Science.gov (United States)

    Ghika, Joseph; Diéguez, Sebastian; Assal, Frédéric; Demonet, Jean-François

    2013-11-13

    Mirror behaviors in advanced dementia are: the mirror sign of Abely and Delmas, where the patient stares at his face (environment-driven behavior of Lhermitte); non recognition of the self in the mirror (autoprosopagnosia and/or delirious auto-Capgras); mirror agnosia of Ramachandran and Binkofski where the patient do not understand the concept of mirror and its use; the psychovisual reflex, or reflex pursuit of the eyes when passively moving a minrror in front of a patient (intact vision); mirror writing (procedural learning). We describe four demented patients with mirror behaviors assessing brain mechanisms of self recognition, social brain and mental and visuo-spatial manipulation of images and objects.

  6. Computer-Aided Design (CAD) for Integrated Microelectromechanical (MEMS) Devices

    National Research Council Canada - National Science Library

    Judy, Michael

    2002-01-01

    The objective of this "CAD for Integrated MEMS Devices" research project was to develop MEMS CAD design and development tools that would facilitate the creation of behavioral models for complex MEMS devices...

  7. Integration of a MEMS Inertial Measuring Unit with a MEMS Magnetometer for 3D Orientation Estimation

    DEFF Research Database (Denmark)

    Cai, Junping; Malureanu, Christian; Andersen, Niels Lervad

    2011-01-01

    This paper presents an algorithm for combining the measurements of a MEMS Inertial Measurement Unit (IMU) and a MEMS magnetometer. The measurements are done using a special designed and customized miniature detecting system for 3D orientation estimation, and position tracking......This paper presents an algorithm for combining the measurements of a MEMS Inertial Measurement Unit (IMU) and a MEMS magnetometer. The measurements are done using a special designed and customized miniature detecting system for 3D orientation estimation, and position tracking...

  8. Composite Material Mirror Testing

    Science.gov (United States)

    2000-01-01

    In this photograph, the composite material mirror is tested in the X-Ray Calibration Facility at the Marshall Space Flight Center for the James Webb Space Telescope (JWST). The mirror test conducted was to check the ability to accurately model and predict the cryogenic performance of complex mirror systems, and the characterization of cryogenic dampening properties of beryllium. The JWST, a next generation successor to the Hubble Space Telescope (HST), was named in honor of James W. Webb, NASA's second administrator, who led NASA in the early days of the fledgling Aerospace Agency. Scheduled for launch in 2010 aboard an expendable launch vehicle, the JWST will be able to look deeper into the universe than the HST because of the increased light-collecting power of its larger mirror and the extraordinary sensitivity of its instrument to infrared light.

  9. Mirror reactor surface study

    Energy Technology Data Exchange (ETDEWEB)

    Hunt, A. L.; Damm, C. C.; Futch, A. H.; Hiskes, J. R.; Meisenheimer, R. G.; Moir, R. W.; Simonen, T. C.; Stallard, B. W.; Taylor, C. E.

    1976-09-01

    A general survey is presented of surface-related phenomena associated with the following mirror reactor elements: plasma first wall, ion sources, neutral beams, director converters, vacuum systems, and plasma diagnostics. A discussion of surface phenomena in possible abnormal reactor operation is included. Several studies which appear to merit immediate attention and which are essential to the development of mirror reactors are abstracted from the list of recommended areas for surface work. The appendix contains a discussion of the fundamentals of particle/surface interactions. The interactions surveyed are backscattering, thermal desorption, sputtering, diffusion, particle ranges in solids, and surface spectroscopic methods. A bibliography lists references in a number of categories pertinent to mirror reactors. Several complete published and unpublished reports on surface aspects of current mirror plasma experiments and reactor developments are also included.

  10. Mirror reactor surface study

    International Nuclear Information System (INIS)

    Hunt, A.L.; Damm, C.C.; Futch, A.H.; Hiskes, J.R.; Meisenheimer, R.G.; Moir, R.W.; Simonen, T.C.; Stallard, B.W.; Taylor, C.E.

    1976-01-01

    A general survey is presented of surface-related phenomena associated with the following mirror reactor elements: plasma first wall, ion sources, neutral beams, director converters, vacuum systems, and plasma diagnostics. A discussion of surface phenomena in possible abnormal reactor operation is included. Several studies which appear to merit immediate attention and which are essential to the development of mirror reactors are abstracted from the list of recommended areas for surface work. The appendix contains a discussion of the fundamentals of particle/surface interactions. The interactions surveyed are backscattering, thermal desorption, sputtering, diffusion, particle ranges in solids, and surface spectroscopic methods. A bibliography lists references in a number of categories pertinent to mirror reactors. Several complete published and unpublished reports on surface aspects of current mirror plasma experiments and reactor developments are also included

  11. Mirror fermions and cosmology

    International Nuclear Information System (INIS)

    Senjanovic, G.; Virginia Polytechnic Inst. and State Univ., Blacksburg

    1984-07-01

    Extended supersymmetry, Kaluza-Klein theory and family unification all suggest the existence of mirror fermions, with same quantum numbers but opposite helicities from ordinary fermions. The laboratory and especially cosmological implications of such particles are reviewed and summarized. (author)

  12. Manufacturing parabolic mirrors

    CERN Multimedia

    CERN PhotoLab

    1975-01-01

    The photo shows the construction of a vertical centrifuge mounted on an air cushion, with a precision of 1/10000 during rotation, used for the manufacture of very high=precision parabolic mirrors. (See Annual Report 1974.)

  13. Corticospinal mirror neurons

    OpenAIRE

    Kraskov, A.; Philipp, R.; Waldert, S.; Vigneswaran, G.; Quallo, M. M.; Lemon, R. N.

    2014-01-01

    Here, we report the properties of neurons with mirror-like characteristics that were identified as pyramidal tract neurons (PTNs) and recorded in the ventral premotor cortex (area F5) and primary motor cortex (M1) of three macaque monkeys. We analysed the neurons' discharge while the monkeys performed active grasp of either food or an object, and also while they observed an experimenter carrying out a similar range of grasps. A considerable proportion of tested PTNs showed clear mirror-like p...

  14. Biocompatible Optically Transparent MEMS for Micromechanical Stimulation and Multimodal Imaging of Living Cells.

    Science.gov (United States)

    Fior, Raffaella; Kwok, Jeanie; Malfatti, Francesca; Sbaizero, Orfeo; Lal, Ratnesh

    2015-08-01

    Cells and tissues in our body are continuously subjected to mechanical stress. Mechanical stimuli, such as tensile and contractile forces, and shear stress, elicit cellular responses, including gene and protein alterations that determine key behaviors, including proliferation, differentiation, migration, and adhesion. Several tools and techniques have been developed to study these mechanobiological phenomena, including micro-electro-mechanical systems (MEMS). MEMS provide a platform for nano-to-microscale mechanical stimulation of biological samples and quantitative analysis of their biomechanical responses. However, current devices are limited in their capability to perform single cell micromechanical stimulations as well as correlating their structural phenotype by imaging techniques simultaneously. In this study, a biocompatible and optically transparent MEMS for single cell mechanobiological studies is reported. A silicon nitride microfabricated device is designed to perform uniaxial tensile deformation of single cells and tissue. Optical transparency and open architecture of the device allows coupling of the MEMS to structural and biophysical assays, including optical microscopy techniques and atomic force microscopy (AFM). We demonstrate the design, fabrication, testing, biocompatibility and multimodal imaging with optical and AFM techniques, providing a proof-of-concept for a multimodal MEMS. The integrated multimodal system would allow simultaneous controlled mechanical stimulation of single cells and correlate cellular response.

  15. Performance of the second MEMS space telescope for observation of extreme lightning from space

    Science.gov (United States)

    Jeon, Jin-A.; Lee, Hye Young; Kim, Ji Eun; Lee, Jik; Park, Il H.

    2016-03-01

    A small space-telescope equipped with a micro-electro-mechanical system (MEMS) micro-mirror is applied to space missions for observing random, rare and temporal events like transient luminous events (TLEs). The measurement of TLEs with fine time resolution will show the different temporal profiles predicted by the various models for sprites, blue jets, elves and halos. The proposed space-telescope consists of three components: two sub-telescopes with different focal lengths and a spectrometer. The trigger telescope with a short focal length surveys a wide field of view. The zoom-in telescope with a long focal length looks into a small field of view area that is part of the trigger telescope's wide field of view. Upon identifying a candidate TLE, the trigger telescope determines the location of the event and provides the location to the MEMS micro-mirror. Then, the micro-mirror, which is placed as a pinhole in front of the zoom-in telescope, rotates its mirror plane by such an angle that the zoom-in telescope will watch the small field of view around the center of the event. In this manner, the zoom-in telescope achieves the zoom-in designed by its long focal length. The first such small-space telescope, the MEMS Telescope for Extreme Lightning (MTEL), was launched into space in 2009 and identified a few candidates sprites. However a power failure (over-charge of the solar battery) of the main satellite occurred, and the MTEL was not able to continue space operation to acquire sizable statistics for TLE events. We developed and constructed the second small-space telescope, called MTEL-II, to continue to observe TLE events in space. In this paper, we present the performance of MTEL-II based on ground tests.

  16. Optical performance requirements for MEMS-scanner-based microdisplays

    Science.gov (United States)

    Urey, Hakan; Wine, David W.; Osborn, Thor D.

    2000-08-01

    High-resolution and high frame rate dynamic microdisplays can be implemented by scanning a photon beam in a raster format across the viewer's retina. Microvision is developing biaxial MEMS scanners for such video display applications. This paper discusses the optical performance requirements for scanning display systems. The display resolution directly translates into a scan-angle-mirror-size product and the frame rate translates into vertical and horizontal scanner frequencies. (theta) -product and fh are both very important figures of merit for scanner performance comparison. In addition, the static and dynamic flatness of the scanners, off-axis motion and scan repeatability, scanner position sensor accuracy all have a direct impact on display image quality.

  17. Miniaturized GPS/MEMS IMU integrated board

    Science.gov (United States)

    Lin, Ching-Fang (Inventor)

    2012-01-01

    This invention documents the efforts on the research and development of a miniaturized GPS/MEMS IMU integrated navigation system. A miniaturized GPS/MEMS IMU integrated navigation system is presented; Laser Dynamic Range Imager (LDRI) based alignment algorithm for space applications is discussed. Two navigation cameras are also included to measure the range and range rate which can be integrated into the GPS/MEMS IMU system to enhance the navigation solution.

  18. CFD-ACE+: a CAD system for simulation and modeling of MEMS

    Science.gov (United States)

    Stout, Phillip J.; Yang, H. Q.; Dionne, Paul; Leonard, Andy; Tan, Zhiqiang; Przekwas, Andrzej J.; Krishnan, Anantha

    1999-03-01

    Computer aided design (CAD) systems are a key to designing and manufacturing MEMS with higher performance/reliability, reduced costs, shorter prototyping cycles and improved time- to-market. One such system is CFD-ACE+MEMS, a modeling and simulation environment for MEMS which includes grid generation, data visualization, graphical problem setup, and coupled fluidic, thermal, mechanical, electrostatic, and magnetic physical models. The fluid model is a 3D multi- block, structured/unstructured/hybrid, pressure-based, implicit Navier-Stokes code with capabilities for multi- component diffusion, multi-species transport, multi-step gas phase chemical reactions, surface reactions, and multi-media conjugate heat transfer. The thermal model solves the total enthalpy from of the energy equation. The energy equation includes unsteady, convective, conductive, species energy, viscous dissipation, work, and radiation terms. The electrostatic model solves Poisson's equation. Both the finite volume method and the boundary element method (BEM) are available for solving Poisson's equation. The BEM method is useful for unbounded problems. The magnetic model solves for the vector magnetic potential from Maxwell's equations including eddy currents but neglecting displacement currents. The mechanical model is a finite element stress/deformation solver which has been coupled to the flow, heat, electrostatic, and magnetic calculations to study flow, thermal electrostatically, and magnetically included deformations of structures. The mechanical or structural model can accommodate elastic and plastic materials, can handle large non-linear displacements, and can model isotropic and anisotropic materials. The thermal- mechanical coupling involves the solution of the steady state Navier equation with thermoelastic deformation. The electrostatic-mechanical coupling is a calculation of the pressure force due to surface charge on the mechanical structure. Results of CFD-ACE+MEMS modeling of MEMS

  19. Wafer level packaging of MEMS

    International Nuclear Information System (INIS)

    Esashi, Masayoshi

    2008-01-01

    Wafer level packaging plays many important roles for MEMS (micro electro mechanical systems), including cost, yield and reliability. MEMS structures on silicon chips are encapsulated between bonded wafers or by surface micromachining, and electrical interconnections are made from the cavity. Bonding at the interface, such as glass–Si anodic bonding and metal-to-metal bonding, requires electrical interconnection through the lid vias in many cases. On the other hand, lateral electrical interconnections on the surface of the chip are used for bonding with intermediate melting materials, such as low melting point glass and solder. The cavity formed by surface micromachining is made using sacrificial etching, and the openings needed for the sacrificial etching are plugged using deposition sealing methods. Vacuum packaging methods and the structures for electrical feedthrough for the interconnection are discussed in this review. (topical review)

  20. Cryogenic MEMS Technology for Sensing Applications Project

    Data.gov (United States)

    National Aeronautics and Space Administration — The development of cryogenic microwave components, such as focal plane polarization modulators, first requires an RF MEMS switching technology that operates...

  1. MEMS Bragg grating force sensor

    DEFF Research Database (Denmark)

    Reck, Kasper; Thomsen, Erik Vilain; Hansen, Ole

    2011-01-01

    We present modeling, design, fabrication and characterization of a new type of all-optical frequency modulated MEMS force sensor based on a mechanically amplified double clamped waveguide beam structure with integrated Bragg grating. The sensor is ideally suited for force measurements in harsh...... environments and for remote and distributed sensing and has a measured sensitivity of -14 nm/N, which is several times higher than what is obtained in conventional fiber Bragg grating force sensors. © 2011 Optical Society of America....

  2. Research on primary mirror lateral support structure of large-aperture telescope

    Science.gov (United States)

    Wang, Yang

    2010-05-01

    The primary mirror of large-aperture telescope is an important component of telescope system. The surface figure error of the primary mirror is a critical factor affecting the imaging quality of telescope system. With the augment of primary mirror aperture, the surface figure error of the primary mirror is affected by many factors, such as gravity, thermal deformation and so on. The factors that influence the surface figure error of the primary mirror are considered and analyzed roundly according to technical requirements of optical system. So the feasible project is researched on the lateral support structure of large-aperture telescope primary mirror. The primary mirror support system of large-aperture telescope is composed of axial support and lateral support. In traditional telescope, the contribution of lateral support to surface distortion is less than axial support. With increase of diameter to thickness ratio, lateral support is becoming more complicated and important than before. Lateral support is a key technology the same as axial support for the large-aperture telescope primary mirror. With the foundation of analysis, comparison and conclusion of related literature and monograph, according to primary mirror supporting principle of the large-aperture telescope. Lateral support methods, the influence of the primary mirror surface figure error due to primary mirror lateral support and lateral support structure of primary mirror are analyzed.

  3. Challenges in the Packaging of MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Malshe, A.P.; Singh, S.B.; Eaton, W.P.; O' Neal, C.; Brown, W.D.; Miller, W.M.

    1999-03-26

    The packaging of Micro-Electro-Mechanical Systems (MEMS) is a field of great importance to anyone using or manufacturing sensors, consumer products, or military applications. Currently much work has been done in the design and fabrication of MEMS devices but insufficient research and few publications have been completed on the packaging of these devices. This is despite the fact that packaging is a very large percentage of the total cost of MEMS devices. The main difference between IC packaging and MEMS packaging is that MEMS packaging is almost always application specific and greatly affected by its environment and packaging techniques such as die handling, die attach processes, and lid sealing. Many of these aspects are directly related to the materials used in the packaging processes. MEMS devices that are functional in wafer form can be rendered inoperable after packaging. MEMS dies must be handled only from the chip sides so features on the top surface are not damaged. This eliminates most current die pick-and-place fixtures. Die attach materials are key to MEMS packaging. Using hard die attach solders can create high stresses in the MEMS devices, which can affect their operation greatly. Low-stress epoxies can be high-outgassing, which can also affect device performance. Also, a low modulus die attach can allow the die to move during ultrasonic wirebonding resulting to low wirebond strength. Another source of residual stress is the lid sealing process. Most MEMS based sensors and devices require a hermetically sealed package. This can be done by parallel seam welding the package lid, but at the cost of further induced stress on the die. Another issue of MEMS packaging is the media compatibility of the packaged device. MEMS unlike ICS often interface with their environment, which could be high pressure or corrosive. The main conclusion we can draw about MEMS packaging is that the package affects the performance and reliability of the MEMS devices. There is a

  4. Physics of mirror systems

    International Nuclear Information System (INIS)

    Post, R.F.

    1982-05-01

    In recent years the emphasis in research on the magnetic mirror approach to fusion has been shifted to address what are essentially economically-motivated issues. The introduction of the Tandem Mirror idea solved in principal the problem of low Q (low fusion power gain) of mirror-based fusion systems. In order to optimize the tandem mirror idea from an economic standpoint, some important improvements have been suggested. These improvements include the thermal barrier idea of Baldwin and Logan and the axicell concept of Kesner. These new modifications introduce some special physics considerations. Among these are (1) The MHD stability properties of high energy electron components in the end cells; (2) The optimization of end-cell magnetic field configurations with the objective of minimizing equilibrium parallel currents; (3) The suppression of microstabilities by use of sloshing ion distributions. Following a brief outline of tandem mirror concepts, the above three topics are discussed, with illustrative examples taken from earlier work or from recent design studies

  5. Endoscopic optical coherence tomography with a modified microelectromechanical systems mirror for detection of bladder cancers

    Science.gov (United States)

    Xie, Tuqiang; Xie, Huikai; Fedder, Gary K.; Pan, Yingtian

    2003-11-01

    Experimental results of a modified micromachined microelectromechanical systems (MEMS) mirror for substantial enhancement of the transverse laser scanning performance of endoscopic optical coherence tomography (EOCT) are presented. Image distortion due to buckling of MEMS mirror in our previous designs was analyzed and found to be attributed to excessive internal stress of the transverse bimorph meshes. The modified MEMS mirror completely eliminates bimorph stress and the resultant buckling effect, which increases the wobbling-free angular optical actuation to greater than 37°, exceeding the transverse laser scanning requirements for EOCT and confocal endoscopy. The new optical coherence tomography (OCT) endoscope allows for two-dimensional cross-sectional imaging that covers an area of 4.2 mm × 2.8 mm (limited by scope size) and at roughly 5 frames/s instead of the previous area size of 2.9 mm × 2.8 mm and is highly suitable for noninvasive and high-resolution imaging diagnosis of epithelial lesions in vivo. EOCT images of normal rat bladders and rat bladder cancers are compared with the same cross sections acquired with conventional bench-top OCT. The results clearly demonstrate the potential of EOCT for in vivo imaging diagnosis and precise guidance for excisional biopsy of early bladder cancers.

  6. Direction Finding Using Multiple MEMS Acoustic Sensors

    Science.gov (United States)

    2015-09-01

    MEMS ACOUSTIC SENSORS by Daniel Wilmott September 2015 Thesis Advisor: Gamani Karunasiri Co-Advisor: Fabio Alves THIS PAGE INTENTIONALLY LEFT......resonance over an angular range of 120° with a maximum uncertainty of 3.4°. 14. SUBJECT TERMS MEMS , direction finding, Ormia ochracea, acoustic sensor

  7. Listening to MEMS : An acoustic vibrometer

    NARCIS (Netherlands)

    Yntema, Doekle Reinder; Haneveld, J.; Engelen, Johannes Bernardus Charles; Brookhuis, Robert Anton; Sanders, Remco G.P.; Wiegerink, Remco J.; Elwenspoek, Michael Curt

    2010-01-01

    new way to characterize vibrating MEMS devices is presented. Using an acoustic particle velocity sensor the coupled sound field is measured, which is a measure for the movement of the MEMS device. We present several possible applications of this measurement method. It can be used as a read-out

  8. A Teaching - Learning Framework for MEMS Education

    International Nuclear Information System (INIS)

    Sheeparamatti, B G; Angadi, S A; Sheeparamatti, R B; Kadadevaramath, J S

    2006-01-01

    Micro-Electro-Mechanical Systems (MEMS) technology has been identified as one of the most promising technologies in the 21st century. MEMS technology has opened up a wide array of unforeseen applications. Hence it is necessary to train the technocrats of tomorrow in this emerging field to meet the industrial/societal demands. The drive behind fostering of MEMS technology is the reduction in the cost, size, weight, and power consumption of the sensors, actuators, and associated electronics. MEMS is a multidisciplinary engineering and basic science area which includes electrical engineering, mechanical engineering, material science and biomedical engineering. Hence MEMS education needs a special approach to prepare the technocrats for a career in MEMS. The modern education methodology using computer based training systems (CBTS) with embedded modeling and simulation tools will help in this direction. The availability of computer based learning resources such as MATLAB, ANSYS/Multiphysics and rapid prototyping tools have contributed to proposition of an efficient teaching-learning framework for MEMS education presented in this paper. This paper proposes a conceptual framework for teaching/learning MEMS in the current technical education scenario

  9. Orbifolded Konishi from the mirror TBA

    Energy Technology Data Exchange (ETDEWEB)

    De Leeuw, Marius [Max-Planck-Institut fuer Gravitationsphysik, Albert-Einstein-Institute, Am Muehlenberg 1, 14476 Potsdam (Germany); Van Tongeren, Stijn J, E-mail: Marius.de.Leeuw@aei.mpg.de, E-mail: S.J.vanTongeren@uu.nl [Institute for Theoretical Physics and Spinoza Institute, Utrecht University, 3508 TD Utrecht (Netherlands)

    2011-08-12

    Starting with a discussion of the general applicability of the simplified mirror thermodynamic Bethe ansatz (TBA) equations to simple deformations of the AdS{sub 5} x S{sup 5} superstring, we proceed to study a specific type of orbifold to which the undeformed simplified TBA equations directly apply. We then use this set of equations, as well as Luescher's approach, to determine the next-to-leading-order wrapping correction to the energy of what we call the orbifolded Konishi state and show that they perfectly agree. In addition we discuss wrapping corrections to the ground-state energy of the orbifolded model under consideration.

  10. Surface micromachined scanning mirrors

    DEFF Research Database (Denmark)

    Mattsson, Kent Erik

    1992-01-01

    Both aluminum cantilever and torsional scanning mirrors have been fabricated and their static and dynamic properties are studied experimentally and theoretically. The experiments showed resonance frequencies in the range of 163 k-Hz - 632 kHz for cantilever beams with Q values between 5 and 11....... Torsional mirrors showed resonance frequencies in the range of 410 kHz - 667 kHz with Q values of 10 - 17. All measurements performed at atmospheric pressure. Both types of mechanical structures were deflected electrostatically at large angles (± 5°) more than 1011 times without breaking and without any...

  11. A Conceptual Mirror

    DEFF Research Database (Denmark)

    Badie, Farshad

    2017-01-01

    product of the constructivist interactions. The most significant matter in meaning construction is producing the own meaningful comprehension, realisation and understanding. Here the learner gets to know how to develop her/his thinking. In this research, I will focus on relating (i) meaning construction...... will analyse the logical dependencies between learner and men- tor and will check their reflectional symmetrical relationship in a conceptual mirror. The conceptual mirror is a phenomenon that represents the meeting point of the mentor’s and the learner’s conceptual knowledge....

  12. Measurement of copper vapour laser-induced deformation of ...

    Indian Academy of Sciences (India)

    2014-02-14

    Feb 14, 2014 ... Abstract. AMichelson interferometer-based technique has been used to measure the deformation of dielectric-coated mirror, caused by an incident repetitive pulsed laser beam with high average power. Minimum measurable deformation of 17 nm is reported.

  13. q-deformed oscillators and D-branes on conifold

    International Nuclear Information System (INIS)

    Okuyama, Kazumi

    2009-01-01

    We study the q-deformed oscillator algebra acting on the wavefunctions of non-compact D-branes in the topological string on conifold. We find that the mirror B-model curve of conifold appears from the commutation relation of the q-deformed oscillators

  14. Four-zone varifocus mirrors with adaptive control of primary and higher-order spherical aberration.

    Science.gov (United States)

    Lukes, Sarah J; Downey, Ryan D; Kreitinger, Seth T; Dickensheets, David L

    2016-07-01

    Electrostatically actuated deformable mirrors with four concentric annular electrodes can exert independent control over defocus as well as primary, secondary, and tertiary spherical aberration. In this paper we use both numerical modeling and physical measurements to characterize recently developed deformable mirrors with respect to the amount of spherical aberration each can impart, and the dependence of that aberration control on the amount of defocus the mirror is providing. We find that a four-zone, 4 mm diameter mirror can generate surface shapes with arbitrary primary, secondary, and tertiary spherical aberration over ranges of ±0.4, ±0.2, and ±0.15  μm, respectively, referred to a non-normalized Zernike polynomial basis. We demonstrate the utility of this mirror for aberration-compensated focusing of a high NA optical system.

  15. MEMS-based handheld scanning probe with pre-shaped input signals for distortion-free images in Gabor-domain optical coherence microscopy.

    Science.gov (United States)

    Cogliati, Andrea; Canavesi, Cristina; Hayes, Adam; Tankam, Patrice; Duma, Virgil-Florin; Santhanam, Anand; Thompson, Kevin P; Rolland, Jannick P

    2016-06-13

    High-speed scanning in optical coherence tomography (OCT) often comes with either compromises in image quality, the requirement for post-processing of the acquired images, or both. We report on distortion-free OCT volumetric imaging with a dual-axis micro-electro-mechanical system (MEMS)-based handheld imaging probe. In the context of an imaging probe with optics located between the 2D MEMS and the sample, we report in this paper on how pre-shaped open-loop input signals with tailored non-linear parts were implemented in a custom control board and, unlike the sinusoidal signals typically used for MEMS, achieved real-time distortion-free imaging without post-processing. The MEMS mirror was integrated into a compact, lightweight handheld probe. The MEMS scanner achieved a 12-fold reduction in volume and 17-fold reduction in weight over a previous dual-mirror galvanometer-based scanner. Distortion-free imaging with no post-processing with a Gabor-domain optical coherence microscope (GD-OCM) with 2 μm axial and lateral resolutions over a field of view of 1 × 1 mm2 is demonstrated experimentally through volumetric images of a regular microscopic structure, an excised human cornea, and in vivo human skin.

  16. Development of MEMS photoacoustic spectroscopy

    Energy Technology Data Exchange (ETDEWEB)

    Robinson, Alex Lockwood; Eichenfield, Matthew S.; Griffin, Benjamin; Harvey, Heidi Alyssa; Nielson, Gregory N.; Okandan, Murat; Langlois, Eric; Resnick, Paul James; Shaw, Michael J.; Young, Ian; Givler, Richard C.; Reinke, Charles M.

    2014-01-01

    After years in the field, many materials suffer degradation, off-gassing, and chemical changes causing build-up of measurable chemical atmospheres. Stand-alone embedded chemical sensors are typically limited in specificity, require electrical lines, and/or calibration drift makes data reliability questionable. Along with size, these "Achilles' heels" have prevented incorporation of gas sensing into sealed, hazardous locations which would highly benefit from in-situ analysis. We report on development of an all-optical, mid-IR, fiber-optic based MEMS Photoacoustic Spectroscopy solution to address these limitations. Concurrent modeling and computational simulation are used to guide hardware design and implementation.

  17. Amorphous Metals and Composites as Mirrors and Mirror Assemblies

    Science.gov (United States)

    Hofmann, Douglas C. (Inventor); Davis, Gregory L. (Inventor); Agnes, Gregory S. (Inventor); Shapiro, Andrew A. (Inventor)

    2016-01-01

    A mirror or mirror assembly fabricated by molding, pressing, assembling, or depositing one or more bulk metal glass (BMG), bulk metal glass composite (BMGMC), or amorphous metal (AM) parts and where the optical surface and backing of the mirror can be fabricated without machining or polishing by utilizing the unique molding capabilities of this class of materials.

  18. The Mirror MMDBMS architecture

    NARCIS (Netherlands)

    de Vries, A.P.; van Doorn, M.G.L.M.; Blanken, Henk; Apers, Peter M.G.

    Handling large collections of digitized multimedia data, usually referred to as multimedia digital libraries, is a major challenge for information technology. The Mirror DBMS is a research database system that is developed to better understand the kind of data management that is required in the

  19. Introduction: Mirrors of Passing

    DEFF Research Database (Denmark)

    Seebach, Sophie Hooge; Willerslev, Rane

    Gaiman’s The Graveyard Book, we explore how the world of the dead and the world of the living can intersect; how time and materiality shifts and changes depending on who experiences it. These revelations, based on fiction, provide a mirror through which the reader can experience the varied chapters...

  20. Rearview Mirror Dimming Function

    Science.gov (United States)

    Layton, William

    2011-01-01

    Students are often unaware of the little tab on a rear-view mirror that is used to dim headlights from the rear. Those who know about this tab are usually interested in knowing how it works. Explanations of the optics involved can be found in Serway and Jewett and Jones and Edge. An alternate explanation is given.

  1. Tandem mirror reactor

    International Nuclear Information System (INIS)

    Moir, R.W.; Barr, W.L.; Carlson, G.A.

    1977-01-01

    A parametric analysis and a preliminary conceptual design for a 1000 MWe Tandem Mirror Reactor (TMR) are described. The concept is sufficiently attractive to encourage further work, both for a pure fusion TMR and a low technology TMR Fusion-Fission Hybrid

  2. Mirror reactor blankets

    International Nuclear Information System (INIS)

    Lee, J.D.; Barmore, W.L.; Bender, D.J.; Doggett, J.N.; Galloway, T.R.

    1976-01-01

    The general requirements of a breeding blanket for a mirror reactor are described. The following areas are discussed: (1) facility layout and blanket maintenance, (2) heat transfer and thermal conversion system, (3) materials, (4) tritium containment and removal, and (5) nuclear performance

  3. Micro electromechanical systems (MEMS) for mechanical engineers

    Energy Technology Data Exchange (ETDEWEB)

    Lee, A. P., LLNL

    1996-11-18

    The ongoing advances in Microelectromechanical Systems (MEMS) are providing man-kind the freedom to travel to dimensional spaces never before conceivable. Advances include new fabrication processes, new materials, tailored modeling tools, new fabrication machines, systems integration, and more detailed studies of physics and surface chemistry as applied to the micro scale. In the ten years since its inauguration, MEMS technology is penetrating industries of automobile, healthcare, biotechnology, sports/entertainment, measurement systems, data storage, photonics/optics, computer, aerospace, precision instruments/robotics, and environment monitoring. It is projected that by the turn of the century, MEMS will impact every individual in the industrial world, totaling sales up to $14 billion (source: System Planning Corp.). MEMS programs in major universities have spawned up all over the United States, preparing the brain-power and expertise for the next wave of MEMS breakthroughs. It should be pointed out that although MEMS has been initiated by electrical engineering researchers through the involvement of IC fabrication techniques, today it has evolved such that it requires a totally multi-disciplinary team to develop useful devices. Mechanical engineers are especially crucial to the success of MEMS development, since 90% of the physical realm involved is mechanical. Mechanical engineers are needed for the design of MEMS, the analysis of the mechanical system, the design of testing apparatus, the implementation of analytical tools, and the packaging process. Every single aspect of mechanical engineering is being utilized in the MEMS field today, however, the impact could be more substantial if more mechanical engineers are involved in the systems level designing. In this paper, an attempt is made to create the pathways for a mechanical engineer to enter in the MEMS field. Examples of application in optics and medical devices will be used to illustrate how mechanical

  4. Recent advancements in system design for miniaturized MEMS-based laser projectors

    Science.gov (United States)

    Scholles, M.; Frommhagen, K.; Gerwig, Ch.; Knobbe, J.; Lakner, H.; Schlebusch, D.; Schwarzenberg, M.; Vogel, U.

    2008-02-01

    Laser projection systems that use the flying spot principle and which are based on a single MEMS micro scanning mirrors are a very promising way to build ultra-compact projectors that may fit into mobile devices. First demonstrators that show the feasibility of this approach and the applicability of the micro scanning mirror developed by Fraunhofer IPMS for these systems have already been presented. However, a number of items still have to be resolved until miniaturized laser projectors are ready for the market. This contribution describes progress on several different items, each of them of major importance for laser projection systems. First of all, the overall performance of the system has been increased from VGA resolution to SVGA (800×600 pixels) with easy connection to a PC via DVI interface or by using the projector as embedded system with direct camera interface. Secondly, the degree of integration of the electronics has been enhanced by design of an application specific analog front end IC for the micro scanning mirror. It has been fabricated in a special high voltage technology and does not only allow to generate driving signals for the scanning mirror with amplitudes of up to 200V but also integrates position detection of the mirror by several methods. Thirdly, first results concerning Speckle reduction have been achieved, which is necessary for generation of images with high quality. Other aspects include laser modulation and solutions regarding projection on tilted screens which is possible because of the unlimited depth of focus.

  5. Physics of mirror fusion systems

    International Nuclear Information System (INIS)

    Post, R.F.

    1976-01-01

    Recent experimental results with the 2XIIB mirror machine at Lawrence Livermore Laboratory have demonstrated the stable confinement of plasmas at fusion temperatures and with energy densities equaling or exceeding that of the confining fields. The physics of mirror confinement is discussed in the context of these new results. Some possible approaches to further improving the confinement properties of mirror systems and the impact of these new approaches on the prospects for mirror fusion reactors are discussed

  6. Mirror reactor studies

    International Nuclear Information System (INIS)

    Moir, R.W.; Barr, W.L.; Bender, D.J.

    1977-01-01

    Design studies of a fusion mirror reactor, a fusion-fission mirror reactor, and two small mirror reactors are summarized. The fusion reactor uses 150-keV neutral-beam injectors based on the acceleration of negative ions. The injectors provide over 1 GW of continuous power at an efficiency greater than 80%. The fusion reactor has three-stage, modularized, Venetian blind, plasma direct converter with a predicted efficiency of 59% and a new concept for removal of the lune-shaped blanket: a crane is brought between the two halves of the Yin-Yang magnet, which are separated by a float. The design has desirable features such as steady-state operation, minimal impurity problems, and low first-wall thermal stress. The major disadvantage is low Q resulting in high re-circulating power and hence high cost of electrical power. However, the direct capital cost per unit of gross electrical power is reasonable [$1000/kW(e)]. By contrast, the fusion-fission reactor design is not penalized by re-circulating power and uses relatively near-term fusion technology being developed for the fusion power program. New results are presented on the Th- 233 U and the U- 239 Pu fuel cycles. The purpose of this hybrid is fuel production, with projected costs at $55/g of Pu or $127/g of 233 U. Blanket and cooling system designs, including an emergency cooling system, by General Atomic Company, lead us to the opinion that the reactor can meet expected safety standards for licensing. The smallest mirror reactor having only a shield between the plasma and the coil is the 4.2-m long fusion engineering research facility (FERF) designed for material irradiation. The smallest mirror reactor having both a blanket and shield is the 7.5-m long experimental power reactor (EPR), which has both a fusion and a fusion-fission version. (author)

  7. Optical-fiber-interconnected MEMS sensors and actuators

    Science.gov (United States)

    Miller, Michael B.; Meller, Scott A.; Wavering, Thomas A.; Greene, Jonathan A.; Murphy, Kent A.

    1998-07-01

    Microelectromechanical systems or MEMS are miniature devices that have several advantages over conventional sensing and actuating technology. MEMS devices benefit form well developed integrated circuit production methods which ensure high volume, high yield processes that create low-cost sensors and actuators. OPtical fiber interconnected MEMS will provide new functionality in MEMS devices such as multiplexed operation for distributed sensing applications. This paper presents approaches in optical fiber to MEMS interfacing and some preliminary results.

  8. Infrastructure, Technology and Applications of Micro-Electro-Mechanical Systems (MEMS)

    Energy Technology Data Exchange (ETDEWEB)

    Allen, J.J.; Jakubczak, J.F.; Krygowski, T.W.; Miller, S.L.; Montague, S.; Rodgers, M.S.; Sniegowski, J.J.

    1999-07-09

    A review is made of the infrastructure, technology and capabilities of Sandia National Laboratories for the development of micromechanical systems. By incorporating advanced fabrication processes, such as chemical mechanical polishing, and several mechanical polysilicon levels, the range of micromechanical systems that can be fabricated in these technologies is virtually limitless. Representative applications include a micro-engine driven mirror, and a micromachined lock. Using a novel integrated MEMS/CMOS technology, a six degree-of-freedom accelerometer/gyroscope system has been designed by researchers at U.C. Berkeley and fabricated on the same silicon chip as the CMOS control circuits to produce an integrated micro-navigational unit.

  9. Design of Surface Micromachined Compliant MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Bradley, Joe Anthony [Iowa State Univ., Ames, IA (United States)

    2002-12-31

    The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a micro-compliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMs, most have used comb-drive actuation methods and bulk micromachining processes. This research focused on fully-compliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms.

  10. Design of Surface micromachined Compliant MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Bradley, Joe Anthony [Iowa State Univ., Ames, IA (United States)

    2001-01-01

    The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a micro-compliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMS, most have used comb-drive actuation methods and bulk micromachining processes. This research focuses on fully-compliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms.

  11. Optical inspection of hidden MEMS structures

    Science.gov (United States)

    Krauter, Johann; Gronle, Marc; Osten, Wolfgang

    2017-06-01

    Micro-electro-mechanical system's (MEMS) applications have greatly expanded over the recent years, and the MEMS industry has grown almost exponentially. One of the strongest drivers are the automotive and consumer markets. A 100% test is necessary especially in the production of automotive MEMS sensors since they are subject to safety relevant functions. This inspection should be carried out before dicing and packaging since more than 90% of the production costs are incurred during these steps. An electrical test is currently being carried out with each MEMS component. In the case of a malfunction, the defect can not be located on the wafer because the MEMS are no longer optically accessible due to the encapsulation. This paper presents a low coherence interferometer for the topography measurement of MEMS structures located within the wafer stack. Here, a high axial and lateral resolution is necessary to identify defects such as stuck or bent MEMS fingers. First, the boundary conditions for an optical inspection system will be discussed. The setup is then shown with some exemplary measurements.

  12. Shape tuning of adaptive structures for MEMS actuator applications

    Science.gov (United States)

    Ma, Zhichun; Lee, Yung-Cheng

    2005-05-01

    This paper describes a systematic shape tuning procedure of adaptive structures for MEMS actuator applications. Due to fabrication process variations, MEMS devices can have different shapes with varied deflections. Such shape variations should be corrected for specific applications. As a result, it is necessary to establish a shape tuning procedure. Finite element modeling and optimization approach were used to minimize the shape variations. The procedure integrated Python programming, ABAQUS, and optimization algorithm for engineering applications. It used the powerful Python scripts programming, the vast library of ABAQUS functions, and a robust preexisting optimization algorithm, NLPQL, which provides more efficient, flexible, and systematic tools for optimization problems. Optimization was used in the adaptive structural designs and the shape tuning procedure after the assembly. Using this approach, three bimorph, gold-on-polysilicon, samples with different initial shapes were studied for shape tuning. The shape was characterized by maximum tip deflection resulting from thermo-mechanical deformations. The standard deviation of the shape variations was reduced from 1.21 to 0.05 μm after tuning. This reduction was verified by experimental data. Another case with ten devices was studied to confirm the effectiveness of the procedure. The standard deviation of the deflections was reduced from 0.81 to 0.02 μm after tuning. These results demonstrated the effectiveness of the optimum procedure for shape tuning. This general-purpose systematic methodology can be applied to adaptive structures for a variety of aerospace applications.

  13. Deformation microstructures

    DEFF Research Database (Denmark)

    Hansen, N.; Huang, X.; Hughes, D.A.

    2004-01-01

    Microstructural characterization and modeling has shown that a variety of metals deformed by different thermomechanical processes follows a general path of grain subdivision, by dislocation boundaries and high angle boundaries. This subdivision has been observed to very small structural scales...

  14. Sleep estimates using microelectromechanical systems (MEMS).

    Science.gov (United States)

    te Lindert, Bart H W; Van Someren, Eus J W

    2013-05-01

    Although currently more affordable than polysomnography, actigraphic sleep estimates have disadvantages. Brand-specific differences in data reduction impede pooling of data in large-scale cohorts and may not fully exploit movement information. Sleep estimate reliability might improve by advanced analyses of three-axial, linear accelerometry data sampled at a high rate, which is now feasible using microelectromechanical systems (MEMS). However, it might take some time before these analyses become available. To provide ongoing studies with backward compatibility while already switching from actigraphy to MEMS accelerometry, we designed and validated a method to transform accelerometry data into the traditional actigraphic movement counts, thus allowing for the use of validated algorithms to estimate sleep parameters. Simultaneous actigraphy and MEMS-accelerometry recording. Home, unrestrained. Fifteen healthy adults (23-36 y, 10 males, 5 females). None. Actigraphic movement counts/15-sec and 50-Hz digitized MEMS-accelerometry. Passing-Bablok regression optimized transformation of MEMS-accelerometry signals to movement counts. Kappa statistics calculated agreement between individual epochs scored as wake or sleep. Bland-Altman plots evaluated reliability of common sleep variables both between and within actigraphs and MEMS-accelerometers. Agreement between epochs was almost perfect at the low, medium, and high threshold (kappa = 0.87 ± 0.05, 0.85 ± 0.06, and 0.83 ± 0.07). Sleep parameter agreement was better between two MEMS-accelerometers or a MEMS-accelerometer and an actigraph than between two actigraphs. The algorithm allows for continuity of outcome parameters in ongoing actigraphy studies that consider switching to MEMS-accelerometers. Its implementation makes backward compatibility feasible, while collecting raw data that, in time, could provide better sleep estimates and promote cross-study data pooling.

  15. Adhesion aspects in MEMS/NEMS

    CERN Document Server

    Kim, Seong H; Mittal, Kash L

    2012-01-01

    Phenomena associated with the adhesion interaction of surfaces have been a critical aspect of micro- and nanosystem development and performance since the first MicroElectroMechanicalSystems(MEMS) were fabricated. These phenomena are ubiquitous in nature and are present in all systems, however MEMS devices are particularly sensitive to their effects owing to their small size and limited actuation force that can be generated. Extension of MEMS technology concepts to the nanoscale and development of NanoElectroMechanicalSystems(NEMS) will result in systems even more strongly influenced by surface

  16. Pressure reciprocity calibration of a MEMS microphone.

    Science.gov (United States)

    Wagner, Randall P; Fick, Steven E

    2017-09-01

    This article reports the first use of the pressure reciprocity technique to calibrate a micro-electromechanical system (MEMS) microphone. This standardized primary calibration method is conventionally used to calibrate laboratory standard microphones. Results for the pressure reciprocity calibration of a MEMS microphone and two laboratory standard microphones are presented for the frequency range 100-10 000 Hz. Because the amplifier in the MEMS microphone package prevents reciprocal operation, this microphone was used only as a receiver of sound. A description of the procedure is presented along with checks of the measurement results and data regarding the uncertainties of these results.

  17. Practical guide to RF-MEMS

    CERN Document Server

    Iannacci, Jacopo

    2013-01-01

    Closes the gap between hardcore-theoretical and purely experimental RF-MEMS books. The book covers, from a practical viewpoint, the most critical steps that have to be taken in order to develop novel RF-MEMS device concepts. Prototypical RF-MEMS devices, both including lumped components and complex networks, are presented at the beginning of the book as reference examples, and these are then discussed from different perspectives with regard to design, simulation, packaging, testing, and post-fabrication modeling. Theoretical concepts are introduced when necessary to complement the practical

  18. Apparatus and process for removing a predetermined portion of reflective material from mirror

    Science.gov (United States)

    Perry, Stephen J.; Steinmetz, Lloyd L.

    1994-01-01

    An apparatus and process are disclosed for removal of a stripe of soft reflective material of uniform width from the surface of a mirror by using a blade having a large included angle to inhibit curling of the blade during the cutting operation which could result in damage to the glass substrate of the mirror. The cutting blade is maintained at a low blade angle with respect to the mirror surface to produce minimal chipping along the cut edge and to minimize the force exerted on the coating normal to the glass surface which could deform the flat mirror. The mirror is mounted in a cutting mechanism containing a movable carriage on which the blade is mounted to provide very accurate straightness of the travel of the blade along the mirror.

  19. Determination Method of Bridge Rotation Angle Response Using MEMS IMU.

    Science.gov (United States)

    Sekiya, Hidehiko; Kinomoto, Takeshi; Miki, Chitoshi

    2016-11-09

    To implement steel bridge maintenance, especially that related to fatigue damage, it is important to monitor bridge deformations under traffic conditions. Bridges deform and rotate differently under traffic load conditions because their structures differ in terms of length and flexibility. Such monitoring enables the identification of the cause of stress concentrations that cause fatigue damage and the proposal of appropriate countermeasures. However, although bridge deformation monitoring requires observations of bridge angle response as well as the bridge displacement response, measuring the rotation angle response of a bridge subject to traffic loads is difficult. Theoretically, the rotation angle response can be calculated by integrating the angular velocity, but for field measurements of actual in-service bridges, estimating the necessary boundary conditions would be difficult due to traffic-induced vibration. To solve the problem, this paper proposes a method for determining the rotation angle response of an in-service bridge from its angular velocity, as measured by a inertial measurement unit (IMU). To verify our proposed method, field measurements were conducted using nine micro-electrical mechanical systems (MEMS) IMUs and two contact displacement gauges. The results showed that our proposed method provided high accuracy when compared to the reference responses calculated by the contact displacement gauges.

  20. Virtual Fabrication of Silicon Nitride Based Multifunctional MEMS Pressure Sensor

    Directory of Open Access Journals (Sweden)

    Mahesh Kumar PATANKAR

    2011-04-01

    Full Text Available This paper shows how to combine absolute and differential pressure sensor on single silicon substrate for measuring the pressure in 0 – 1 MPa range. In this work, the sensor makes use a of silicon nitride square diaphragm supported by a thick silicon rim. Piezoresistors below the diaphragms are defined by the p+ etch stop technique and structured by the anisotropic etching in Wheatstone bridge configuration. In event of pressure, mechanical deformation occurs in the diaphragm and induces the stress in it which can be translated into electrical signal accordingly. This sensor shows the sensitivity of 142 mV/V.KPa. The pressure sensor has been designed, simulated and virtually fabricated using Intellisuite MEMS software tool. Simulation results shows that the good agreement with the analytical solutions.

  1. Gabor-domain optical coherence microscopy with integrated dual-axis MEMS scanner for fast 3D imaging and metrology

    Science.gov (United States)

    Canavesi, Cristina; Cogliati, Andrea; Hayes, Adam; Santhanam, Anand P.; Tankam, Patrice; Rolland, Jannick P.

    2015-10-01

    Fast, robust, nondestructive 3D imaging is needed for characterization of microscopic structures in industrial and clinical applications. A custom micro-electromechanical system (MEMS)-based 2D scanner system was developed to achieve 55 kHz A-scan acquisition in a Gabor-domain optical coherence microscopy (GD-OCM) instrument with a novel multilevel GPU architecture for high-speed imaging. GD-OCM yields high-definition volumetric imaging with dynamic depth of focusing through a bio-inspired liquid lens-based microscope design, which has no moving parts and is suitable for use in a manufacturing setting or in a medical environment. A dual-axis MEMS mirror was chosen to replace two single-axis galvanometer mirrors; as a result, the astigmatism caused by the mismatch between the optical pupil and the scanning location was eliminated and a 12x reduction in volume of the scanning system was achieved. Imaging at an invariant resolution of 2 μm was demonstrated throughout a volume of 1 × 1 × 0.6 mm3, acquired in less than 2 minutes. The MEMS-based scanner resulted in improved image quality, increased robustness and lighter weight of the system - all factors that are critical for on-field deployment. A custom integrated feedback system consisting of a laser diode and a position-sensing detector was developed to investigate the impact of the resonant frequency of the MEMS and the driving signal of the scanner on the movement of the mirror. Results on the metrology of manufactured materials and characterization of tissue samples with GD-OCM are presented.

  2. Mirror Fusion Test Facility

    International Nuclear Information System (INIS)

    Dixon, F.P.

    1977-01-01

    On October 1, 1977 work began at LLL on the Mirror Fusion Test Facility (MFTF), an advanced experimental fusion device. Scheduled for operation in late 1981, MFTF is designed as an intermediate step between present mirror machines, such as 2XIIB, and an experimental fusion reactor. This design incorporates improved technology and a better theoretical understanding of how neutral beam injection, plasma guns, and gas injection into the plasma region compensate for cooling and particle losses. With the new facility, we expect to achieve a confinement factor (n tau) of 10 12 particles . sm/cm 3 --a tenfold increase over 2XIIB n tau values--and to increase plasma temperature to over 500 million K. The following article describes this new facility and reports on progress in some of the R and D projects that are providing the technological base for its construction

  3. Tinbergen on mirror neurons

    OpenAIRE

    Heyes, Cecilia

    2014-01-01

    Fifty years ago, Niko Tinbergen defined the scope of behavioural biology with his four problems: causation, ontogeny, survival value and evolution. About 20 years ago, there was another highly significant development in behavioural biology—the discovery of mirror neurons (MNs). Here, I use Tinbergen's original four problems (rather than the list that appears in textbooks) to highlight the differences between two prominent accounts of MNs, the genetic and associative accounts; to suggest that ...

  4. BN-350 ''Mirror System''

    International Nuclear Information System (INIS)

    Thornton, A.L.; Halbig, J.K.

    2004-01-01

    The BN-350 Unattended Monitoring System plays an important role for the Safeguards Department of the International Atomic Energy Agency (IAEA). In 1998, the Los Alamos National Laboratory, in conjunction with the IAEA and sponsored by the US Department of Energy, designed and installed an integrated multi-instrument safeguards system at the BN-350 reactor in Aktau, Kazakhstan, to monitor spent-fuel and blanket assembly conditioning and canning activities. The purpose of the system was to provide effective safeguards at this facility while reducing the manpower load on the IAEA. The system is composed of many individual nondestructive analysis and surveillance components, each having a unique function and working together to provide fully unattended measurement of spent-fuel assemblies. The BN-350 ''Mirror System'' was built to provide a similar system with like components at the IAEA Headquarters in Vienna to facilitate analysis and/or simulation of problems that might occur in the field and for training inspectors and other technical staff in preparation for their work in the field. In addition, the system is used to test new equipment and qualify new or modified software. This paper describes the main components of the Mirror System, how the components are integrated, and how the Mirror System has benefited the IAEA.

  5. Mirror reactor studies

    International Nuclear Information System (INIS)

    Moir, R.W.; Barr, W.L.; Bender, D.J.

    1976-01-01

    Design studies of a fusion mirror reactor, a fusion-fission mirror reactor, and two small mirror reactors are summarized. The fusion reactor uses 150-keV neutral-beam injectors based on the acceleration of negative ions. The injectors provide over 1 GW of continuous power at an efficiency greater than 80 percent. The fusion reactor has three-stage, modularized, Venetian blind, plasma direct converter with a predicted efficiency of 59 percent and a new concept for removal of the lune-shaped blanket: a crane is brought between the two halves of the Yin-Yang magnet, which are separated by a float. The design has desirable features such as steady-state operation, minimal impurity problems, and low first-wall thermal stress. The major disadvantage is low Q resulting in high recirculating power and hence high cost of electrical power. However, the direct capital cost per unit of gross electrical power is reasonable [$1000/kW(e)

  6. MEMS-based Circuits and Systems for Wireless Communication

    CERN Document Server

    Kaiser, Andreas

    2013-01-01

    MEMS-based Circuits and Systems for Wireless Communication provides comprehensive coverage of RF-MEMS technology from device to system level. This edited volume places emphasis on how system performance for radio frequency applications can be leveraged by Micro-Electro-Mechanical Systems (MEMS). Coverage also extends to innovative MEMS-aware radio architectures that push the potential of MEMS technology further ahead.  This work presents a broad overview of the technology from MEMS devices (mainly BAW and Si MEMS resonators) to basic circuits, such as oscillators and filters, and finally complete systems such as ultra-low-power MEMS-based radios. Contributions from leading experts around the world are organized in three parts. Part I introduces RF-MEMS technology, devices and modeling and includes a prospective outlook on ongoing developments towards Nano-Electro-Mechanical Systems (NEMS) and phononic crystals. Device properties and models are presented in a circuit oriented perspective. Part II focusses on ...

  7. Optical MEMS for chemical analysis and biomedicine

    CERN Document Server

    Jiang, Hongrui

    2016-01-01

    This book describes the current state of optical MEMS in chemical and biomedical analysis and brings together current trends and highlights topics representing the most exciting progress in recent years in the field.

  8. Advanced mechatronics and MEMS devices II

    CERN Document Server

    Wei, Bin

    2017-01-01

    This book introduces the state-of-the-art technologies in mechatronics, robotics, and MEMS devices in order to improve their methodologies. It provides a follow-up to "Advanced Mechatronics and MEMS Devices" (2013) with an exploration of the most up-to-date technologies and their applications, shown through examples that give readers insights and lessons learned from actual projects. Researchers on mechatronics, robotics, and MEMS as well as graduate students in mechanical engineering will find chapters on: Fundamental design and working principles on MEMS accelerometers Innovative mobile technologies Force/tactile sensors development Control schemes for reconfigurable robotic systems Inertial microfluidics Piezoelectric force sensors and dynamic calibration techniques ...And more. Authors explore applications in the areas of agriculture, biomedicine, advanced manufacturing, and space. Micro-assembly for current and future industries is also considered, as well as the design and development of micro and intel...

  9. MEMS and Nano-Technology Clean Room

    Data.gov (United States)

    Federal Laboratory Consortium — The MEMS and Nano-Technology Clean Room is a state-of-the-art, 800 square foot, Class 1000-capable facility used for development of micro and sub-micro scale sensors...

  10. Wireless MEMs BioSensor, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — Crossfield is proposing to develop a low cost, single chip plant bio-monitor using an embedded MEMs based infrared (IR) spectroscopy gas sensor for carbon dioxide...

  11. MEMS Gyroscope with Interferometric Detection, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — This SBIR Phase I project will develop a MEMS gyroscope that uses an ultra high resolution sensing technique for measuring proof mass motion. The goal is to...

  12. Cryogenic MEMS Pressure Sensor, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — A directly immersible cryogenic MEMS pressure sensor will be developed. Each silicon die will contain a vacuum-reference and a tent-like membrane. Offsetting thermal...

  13. MEMS Gyroscope with Interferometric Detection, Phase II

    Data.gov (United States)

    National Aeronautics and Space Administration — The proposed innovation is a novel MEMS gyroscope that uses micro-interferometric detection to measure the motion of the proof mass. Using an interferometric...

  14. Wireless MEMs BioSensor Project

    Data.gov (United States)

    National Aeronautics and Space Administration — Crossfield is proposing to develop a low cost, single chip plant bio-monitor using an embedded MEMs based infrared (IR) spectroscopy gas sensor for carbon dioxide...

  15. MEMS Shutter for Spectrometer Calibration Project

    Data.gov (United States)

    National Aeronautics and Space Administration —   We shall develop a MEMS shutter that is expected to have 2-3 g mass and consumeThis research will demonstrate fabrication of a low mass (~2-3 grams), low...

  16. SiC MEMS For Harsh Environments

    National Research Council Canada - National Science Library

    Bradley, Kenneth

    2003-01-01

    ... (specifically high temperature) material for both structural and electronic devices. Although shock testing of SiC MEMS devices under this program was not accomplished, subsequent work allowed for this testing to occur, with positive results...

  17. MEMS Sensors and Actuators Laboratory (MSAL)

    Data.gov (United States)

    Federal Laboratory Consortium — The MEMS Sensors and Actuators Laboratory (MSAL) in the A.J. Clark School of Engineering at the University of Maryland (UMD) was established in January 2000. Our lab...

  18. Fabrication of integrated metallic MEMS devices

    DEFF Research Database (Denmark)

    Yalcinkaya, Arda Deniz; Ravnkilde, Jan Tue; Hansen, Ole

    2002-01-01

    A simple and complementary metal oxide semiconductor (CMOS) compatible fabrication technique for microelectromechanical (MEMS) devices is presented. The fabrication technology makes use of electroplated metal layers. Among the fabricated devices, high quality factor microresonators...

  19. MEMS direction finding acoustic sensor

    Science.gov (United States)

    Karunasiri, Gamani; Alves, Fabio; Swan, William

    2017-06-01

    Conventional directional sound sensing systems employ an array of spatially separated microphones to achieve directivity. However, there are insects such as the Ormia ochracea fly that can determine the direction of sound using a miniature hearing organ much smaller than the wavelength of sound it detects. The fly's eardrums are coupled mechanically with a separation of only 0.5 mm and yet have a remarkable sensitivity to the direction of sound. The MEMS based sensor mimicking the fly's hearing system was fabricated using an SOI substrate with a 25 μm device layer. The sensor consists of two 1.5 mm x1.6 mm wings connected in the middle by a 2.7 mm x 30 μm bridge. The entire structure is connected to the substrate by two torsional legs at the center. The frequency response of the sensor showed two resonance frequencies at approximately 1.1 kHz (rocking) and 1.5 kHz (bending). The resonance at 1.1 kHz is due to rocking of the wings by twisting the legs and the other at 1.5 kHz is due to bending of the bridge. The response of the sensor was probed electronically using comb finger capacitors integrated to the edges of the wings and with the help of an MS3110 chip. A peak output voltage of about 9V/Pa was measured for sound incident normal to the device at the resonance frequency of the bending mode. The bearing of the incident sound under these conditions could be determined to within a few degrees. These findings indicate the potential use of the MEMS sensor to locate sound sources with high accuracy.

  20. Variable Emissivity Through MEMS Technology

    Science.gov (United States)

    Darrin, Ann Garrison; Osiander, Robert; Champion, John; Swanson, Ted; Douglas, Donya; Grob, Lisa M.; Powers, Edward I. (Technical Monitor)

    2000-01-01

    This paper discusses a new technology for variable emissivity (vari-e) radiator surfaces, which has significant advantages over traditional radiators and promises an alternative design technique for future spacecraft thermal control systems. All spacecraft rely on radiative surfaces to dissipate waste heat. These radiators have special coatings, typically with a low solar absorptivity and a high infrared-red emissivity, that are intended to optimize performance under the expected heat load and thermal sink environment. The dynamics of the heat loads and thermal environment make it a challenge to properly size the radiator and often require some means of regulating the heat rejection rate of the radiators in order to achieve proper thermal balance. Specialized thermal control coatings, which can passively or actively adjust their emissivity offer an attractive solution to these design challenges. Such systems would allow intelligent control of the rate of heat loss from a radiator in response to heat load and thermal environmental variations. Intelligent thermal control through variable emissivity systems is well suited for nano and pico spacecraft applications where large thermal fluctuations are expected due to the small thermal mass and limited electric resources. Presently there are three different types of vari-e technologies under development: Micro ElectroMechanical Systems (MEMS) louvers, Electrochromic devices, and Electrophoretic devices. This paper will describe several prototypes of micromachined (MEMS) louvers and experimental results for the emissivity variations measured on theses prototypes. It will further discuss possible actuation mechanisms and space reliability aspects for different designs. Finally, for comparison parametric evaluations of the thermal performances of the new vari-e technology and standard thermal control systems are presented in this paper.

  1. Digital holography for MEMS and microsystem metrology

    CERN Document Server

    Asundi, Anand

    2011-01-01

    Approaching the topic of digital holography from the practical perspective of industrial inspection, Digital Holography for MEMS and Microsystem Metrology describes the process of digital holography and its growing applications for MEMS characterization, residual stress measurement, design and evaluation, and device testing and inspection. Asundi also provides a thorough theoretical grounding that enables the reader to understand basic concepts and thus identify areas where this technique can be adopted. This combination of both practical and theoretical approach will ensure the

  2. Fabrication of integrated metallic MEMS devices

    DEFF Research Database (Denmark)

    Yalcinkaya, Arda Deniz; Ravnkilde, Jan Tue; Hansen, Ole

    2002-01-01

    A simple and complementary metal oxide semiconductor (CMOS) compatible fabrication technique for microelectromechanical (MEMS) devices is presented. The fabrication technology makes use of electroplated metal layers. Among the fabricated devices, high quality factor microresonators are characteri......A simple and complementary metal oxide semiconductor (CMOS) compatible fabrication technique for microelectromechanical (MEMS) devices is presented. The fabrication technology makes use of electroplated metal layers. Among the fabricated devices, high quality factor microresonators...

  3. Nano-tribology and materials in MEMS

    CERN Document Server

    Satyanarayana, N; Lim, Seh

    2013-01-01

    This book brings together recent developments in the areas of MEMS tribology, novel lubricants and coatings for nanotechnological applications, biomimetics in tribology and fundamentals of micro/nano-tribology. Tribology plays important roles in the functioning and durability of machines at small length scales because of the problems associated with strong surface adhesion, friction, wear etc. Recently, a number of studies have been conducted to understand tribological phenomena at nano/micro scales and many new tribological solutions for MEMS have been proposed.

  4. Challenges in the Packaging of MEMS

    Energy Technology Data Exchange (ETDEWEB)

    BROWN, WILLIAM D.; EATON, WILLIAM P.; MALSHE, AJAY P.; MILLER, WILLIAM M.; O' NEAL, CHAD; SINGH, SUSHILA B.

    1999-09-24

    Microelectromechanical Systems (MEMS) packaging is much different from conventional integrated circuit (IC) packaging. Many MEMS devices must interface to the environment in order to perform their intended function, and the package must be able to facilitate access with the environment while protecting the device. The package must also not interfere with or impede the operation of the MEMS device. The die attachment material should be low stress, and low outgassing, while also minimizing stress relaxation overtime which can lead to scale factor shifts in sensor devices. The fabrication processes used in creating the devices must be compatible with each other, and not result in damage to the devices. Many devices are application specific requiring custom packages that are not commercially available. Devices may also need media compatible packages that can protect the devices from harsh environments in which the MEMS device may operate. Techniques are being developed to handle, process, and package the devices such that high yields of functional packaged parts will result. Currently, many of the processing steps are potentially harmful to MEMS devices and negatively affect yield. It is the objective of this paper to review and discuss packaging challenges that exist for MEMS systems and to expose these issues to new audiences from the integrated circuit packaging community.

  5. Dynamic metasurface lens based on MEMS technology

    Directory of Open Access Journals (Sweden)

    Tapashree Roy

    2018-02-01

    Full Text Available In the recent years, metasurfaces, being flat and lightweight, have been designed to replace bulky optical components with various functions. We demonstrate a monolithic Micro-Electro-Mechanical System (MEMS integrated with a metasurface-based flat lens that focuses light in the mid-infrared spectrum. A two-dimensional scanning MEMS platform controls the angle of the lens along two orthogonal axes by ±9°, thus enabling dynamic beam steering. The device could be used to compensate for off-axis incident light and thus correct for aberrations such as coma. We show that for low angular displacements, the integrated lens-on-MEMS system does not affect the mechanical performance of the MEMS actuators and preserves the focused beam profile as well as the measured full width at half maximum. We envision a new class of flat optical devices with active control provided by the combination of metasurfaces and MEMS for a wide range of applications, such as miniaturized MEMS-based microscope systems, LIDAR scanners, and projection systems.

  6. A novel piezoresistive polymer nanocomposite MEMS accelerometer

    International Nuclear Information System (INIS)

    Seena, V; Hari, K; Prajakta, S; Ramgopal Rao, V; Pratap, Rudra

    2017-01-01

    A novel polymer MEMS (micro electro mechanical systems) accelerometer with photo-patternable polymer nanocomposite as a piezoresistor is presented in this work. Polymer MEMS Accelerometer with beam thicknesses of 3.3 µ m and embedded nanocomposite piezoresistive layer having a gauge factor of 90 were fabricated. The photosensitive nanocomposite samples were prepared and characterized for analyzing the mechanical and electrical properties and thereby ensuring proper process parameters for incorporating the piezoresistive layer into the polymer MEMS accelerometer. The microfabrication process flow and unit processes followed are extremely low cost with process temperatures below 100 °C. This also opens up a new possibility for easy integration of such polymer MEMS with CMOS (complementary metal oxide semiconductor) devices and circuits. The fabricated devices were characterized using laser Doppler vibrometer (LDV) and the devices exhibited a resonant frequency of 10.8 kHz and a response sensitivity of 280 nm g −1 at resonance. The main focus of this paper is on the SU-8/CB nanocomposite piezoresistive MEMS accelerometer technology development which covers the material and the fabrication aspects of these devices. CoventorWare FEA analysis performed using the extracted material properties from the experimental characterization which are in close agreement to performance parameters of the fabricated devices is also discussed. The simulated piezoresistive polymer MEMS devices showed an acceleration sensitivity of 126 nm g −1 and 82 ppm of Δ R / R per 1 g of acceleration. (paper)

  7. Dynamic metasurface lens based on MEMS technology

    Science.gov (United States)

    Roy, Tapashree; Zhang, Shuyan; Jung, Il Woong; Troccoli, Mariano; Capasso, Federico; Lopez, Daniel

    2018-02-01

    In the recent years, metasurfaces, being flat and lightweight, have been designed to replace bulky optical components with various functions. We demonstrate a monolithic Micro-Electro-Mechanical System (MEMS) integrated with a metasurface-based flat lens that focuses light in the mid-infrared spectrum. A two-dimensional scanning MEMS platform controls the angle of the lens along two orthogonal axes by ±9°, thus enabling dynamic beam steering. The device could be used to compensate for off-axis incident light and thus correct for aberrations such as coma. We show that for low angular displacements, the integrated lens-on-MEMS system does not affect the mechanical performance of the MEMS actuators and preserves the focused beam profile as well as the measured full width at half maximum. We envision a new class of flat optical devices with active control provided by the combination of metasurfaces and MEMS for a wide range of applications, such as miniaturized MEMS-based microscope systems, LIDAR scanners, and projection systems.

  8. INVESTIGATION OF THE STATIC AND DYNAMIC BEHAVIOR OF A MICRO MIRROR

    KAUST Repository

    Ilyas, Saad

    2014-11-01

    This dissertation presents the modeling, design, fabrication, and experimental testing of a polyimide based micro mirror for applications in MEMS logic devices based on its static behavior and in MEMS resonators using mixed frequency excitation. First, a universal MEMS logic device that can perform all the logic operations, such as INVERTER, AND, NAND, NOR, and OR gates using one physical structure, within an operating range of 0-10 volts. It can also perform XOR and XNOR with one access inverter using the same structure with different electrical interconnects. We discuss the fabrication, simulations and experimental results demonstrating these logic operations on a polyimide micro mirror. The device is capable of performing the switching operation with a frequency of 1 kHz, a switching time of 8.2 μs, and an electrical lifetime of 8000 cycles. Second, this study presents an experimental and theoretical investigation of a micro mirror under a mixed frequency signal composed of two harmonic AC sources. The experimental and theoretical dynamics are explored via frequency sweeps in the desired neighborhoods. One frequency is fixed while the other frequency is swept through a wide 5 range to study the dynamic responses of the micro mirror. These responses are studied under different frequencies and different input voltages. The results show interesting dynamics, where the system exhibits primary resonance, and combination resonances of additive and subtractive type. The mixed excitation is demonstrated as a way to increase the bandwidth of the resonator near primary resonance, which can be promising for resonant sensing applications in the effort to increase the signal-noise ratio over extended frequency range. It can be promising for energy harvesting as well; since it provides the system with resonances of very high amplitudes at very low frequencies regardless of what is the natural frequency of the system, however this still needs further investigation.

  9. Relating the "mirrorness" of mirror neurons to their origins.

    Science.gov (United States)

    Kilner, James M; Friston, Karl J

    2014-04-01

    Ever since their discovery, mirror neurons have generated much interest and debate. A commonly held view of mirror neuron function is that they transform "visual information into knowledge," thus enabling action understanding and non-verbal social communication between con-specifics (Rizzolatti & Craighero 2004). This functionality is thought to be so important that it has been argued that mirror neurons must be a result of selective pressure.

  10. Characterizing time-dependent mechanics in metallic MEMS

    Directory of Open Access Journals (Sweden)

    Geers M.G.D.

    2010-06-01

    Full Text Available Experiments for characterization of time-dependent material properties in free-standing metallic microelectromechanical system (MEMS pose challenges: e.g. fabrication and handling (sub-μm sized specimens, control and measurement of sub-μN loads and sub-μm displacements over long periods and various temperatures [1]. A variety of experimental setups have been reported each having their pros and cons. One example is a micro-tensile tester with an ingenious electro-static specimen gripping system [2] aiding simple specimen design giving good results at μN and sub-μm levels, but without in-situ full-field observations. Other progressive examples assimilate the specimen, MEMS actuators and load cells on a single chip [3,4] yielding significant results at nN and nm levels with in-situ TEM/SEM observability, though not without complications: complex load actuator/sensor calibration per chip, measures to reduce fabrication failure and unfeasible cofabrication on wafers with commercial metallic MEMS. This work aims to overcome these drawbacks by developing experimental methods with high sensitivity, precision and in-situ full-field observation capabilities. Moreover, these should be applicable to simple free-standing metallic MEMS that can be co-fabricated with commercial devices. These methods will then serve in systematic studies into size-effects in time-dependent material properties. First a numeric-experimental method is developed. It characterizes bending deformation of onwafer μm-sized aluminum cantilevers. A specially designed micro-clamp is used to mechanically apply a constant precise deflection of the beam (zres <50 nm for a prolonged period, see fig. 1. After this period, the deflection by the micro-clamp is removed. Full-field height maps with the ensuing deformation are measured over time with confocal optical profilometry (COP. This yields the tip deflection as function of time with ~3 nm precision, see fig.2. To extract material

  11. Multiplexing control of a multichannel piezoelectric deformable mirror

    NARCIS (Netherlands)

    Song, H.; Simonov, A.N.; Vdovin, G.

    2005-01-01

    Addressing of massive arrays of piezoelectric actuators is usually achieved by using separate high-voltage output drivers, one per channel. This approach applied to high-order adaptive optics systems results in complex, expensive and vulnerable to handling abuse driver electronics, hardly scalable

  12. Piezoelectric deformable mirror for intra-cavity laser adaptive optics.

    CSIR Research Space (South Africa)

    Long, CS

    2008-03-01

    Full Text Available degree of freedom Fig. 5. Quadrilateral axisymmetric element with rotational degrees of freedom. The variational formulation of these elements employs the skew-symmetric part of the stress tensor as a Lagrange multiplier to enforce the continuum... mechanics definition of rotations in terms of displacement gradient. The stress tensor is therefore not a priori assumed to be symmetric. The finite element implementation starts with an eight-node ‘base element’ in the local coordinate system. The four...

  13. Low-cost deformable mirrors : Technologies and goals

    NARCIS (Netherlands)

    Vldovin, G.; Loktev, M.; Simonov, A.

    2005-01-01

    New applications of adaptive optics, especially in the potentially mass markets such as laser optics, imaging and medicine, require development of new components with high quality and low price. These requirements are equally applicable to wavefront sensors, wavefront reconstructors and wavefront

  14. Modularity, quaternion-Kähler spaces, and mirror symmetry

    Energy Technology Data Exchange (ETDEWEB)

    Alexandrov, Sergei; Banerjee, Sibasish [Université Montpellier 2, Laboratoire Charles Coulomb UMR 5221, F-34095 Montpellier (France)

    2013-10-15

    We provide an explicit twistorial construction of quaternion-Kähler manifolds obtained by deformation of c-map spaces and carrying an isometric action of the modular group SL(2,Z). The deformation is not assumed to preserve any continuous isometry and therefore this construction presents a general framework for describing NS5-brane instanton effects in string compactifications with N= 2 supersymmetry. In this context the modular invariant parametrization of twistor lines found in this work yields the complete non-perturbative mirror map between type IIA and type IIB physical fields.

  15. Progress in mirror machine research

    International Nuclear Information System (INIS)

    Fowler, T.K.; Coensgen, F.H.

    1979-01-01

    The Mirror Fusion Program in the US is now focused on two concepts that can obtain high values of the power gain factor Q. These are the tandem mirror and field reversed mirror concepts. A new facility called TMX has been constructed to test the principles of the tandem mirror. A further attempt to create field reversal is being carried out in the 2XIIB facility (renamed Beta II) with neutral beam injection into a reversed-field target plasma to be created by a magnetized coaxial gun. During the next 5 years, the main mirror facilities in the US will be the TMX, Beta II, and a large mirror device called MFTF scheduled to operate by 1982. The program based on these facilities will be outlined and initial experimental results from TMX will be discussed

  16. MEMS-BASED OSCILLATORS: A REVIEW

    Directory of Open Access Journals (Sweden)

    Jamilah Karim

    2014-05-01

    Full Text Available ABSTRACT: This paper presents an overview of microelectromechanical (MEMS based oscillators. The accuracy and stability of the reference frequency will normally limit the performance of most wireless communication systems. MEMS technology is the technology of choice due to its compatibility to silicon, leading to integration with circuits and lowering power consumption. MEMS based oscillators also provide the potential of a fully integrated transceiver. The most commonly used topology for MEMS based oscillators are pierce oscillator circuit topology and TIA circuit topology. Both topologies result in very competitive output in terms of phase noise and power consumption.  They can be used for either higher or lower Rx. The major difference between both topologies is the number of transistors used. TIA circuit used more number of transistor compare to pierce circuit. Thus design complexity of the TIA is higher. Pierce circuit is simpler, provide straightforward biasing and easier to design. The highly integratable of MEMS-based oscillators have made them much needed in future multiband wireless system. So that future wireless systems are able to function globally without any problem. ABSTRAK: Kertas kerja ini membentangkan gambaran keseluruhan mikroelektromekanikal (MEMS berdasarkan pengayun.  Ketepatan dan kestabilan frekuensi rujukan sering membataskan perlaksanaan kebanyakan sistem komunikasi tanpa wayar. Teknologi MEMS merupakan teknologi pilihan memandangkan ia serasi dengan silikon; membolehkan integrasi dengan litar dan penggunaan tenaga yang rendah.  Pengayun berdasarkan MEMS juga  berpotensi sebagai integrasi penuh penghantar-terima. Topologi yang sering digunakan untuk pengayun berdasarkan MEMS adalah topologi litar pengayun pencantas dan topologi litar TIA.  Keputusan bagi kedua-dua topologi adalah amat kompetitif dari segi fasa bunyi dan penggunaan tenaga. Ia boleh digunakan untuk meninggikan atau merendahkan Rx. Perbezaan utama

  17. Status of the MEMS Industry: Evolution or MEMS Markets and of the Industrial Infrastructure

    Directory of Open Access Journals (Sweden)

    J. C. ELOY

    2007-12-01

    Full Text Available The MEMS markets in 2006 reached US$ 5.8 B and we can estimate that the 2011 MEMS markets will reach more than US $ 10.7 B, with very diverse growth rate depending on the devices and the applications: silicon microphone and RF MEMS are the fastest growing applications but the existing applications like ink jet head and pressure sensors are still growing at a rate of 4 % per year at least. The industrial infrastructure is changing, with more and more companies going to 8’’ manufacturing facilities and the strong growth of the MEMS foundry business. MEMS business is changing for more structured industry and high volume production.

  18. How Well Can We Extract the Permanent Displacement from Low-Cost MEMS Accelerometers?

    Science.gov (United States)

    Jan, Jyh Cherng; Chao, Wei-An; Wu, Yih-Min; Chen, Chien-Chih; Lin, Cheng-Horng

    2017-11-16

    Following the recent establishment of a high-density seismic network equipped with low-cost micro-electro-mechanical system (MEMS) P -wave-alert-device ( P -Alert) by the earthquake early warning (EEW) research group at the National Taiwan University, a large quantity of strong-motion records from moderate-magnitude earthquakes (M L > 6) around Taiwan has been accumulated. Using a data preprocessing scheme to recover the dynamic average embedded within the P -Alert data, we adopted an automatic baseline correction approach for the P -Alert accelerograms to determine the coseismic deformation (Cd). Comparisons between the Cd values determined using global positioning system (GPS) data, strong-motion records from the P -Alert network, and data from the Taiwan Strong Motion Instrumentation Program (TSMIP) demonstrates that the near-real-time determination of Cd values (>2 cm), which provide crucial information for seismic hazard mitigation, is possible using records from low-cost MEMS accelerometers.

  19. Complex/Symplectic Mirrors

    Energy Technology Data Exchange (ETDEWEB)

    Chuang, Wu-yen; Kachru, Shamit; /Stanford U., ITP /SLAC; Tomasiello, Alessandro; /Stanford U., ITP

    2005-10-28

    We construct a class of symplectic non-Kaehler and complex non-Kaehler string theory vacua, extending and providing evidence for an earlier suggestion by Polchinski and Strominger. The class admits a mirror pairing by construction. Comparing hints from a variety of sources, including ten-dimensional supergravity and KK reduction on SU(3)-structure manifolds, suggests a picture in which string theory extends Reid's fantasy to connect classes of both complex non-Kaehler and symplectic non-Kaehler manifolds.

  20. Status report on mirror alternatives

    International Nuclear Information System (INIS)

    Condit, W.C.; Fowler, T.K.; Post, R.F.

    1976-01-01

    The present status of studies at Lawrence Livermore Laboratory (LLL) directed toward exploring variants on the basic magnetic mirror confinement concept is described. These studies have emphasized those ideas that could lead most directly to improvements in the scientific and economic viability of fusion reactors based on the mirror concept, within the general context of the extensive body of specialized physics and technology that has been developed in the course of the Mirror Program

  1. Relay mirror experiment

    Science.gov (United States)

    Begley, David L.

    1996-04-01

    Originating out of a SDIO-funded, Phase 1 study effort, two ground systems and an orbiting EO payload/spacecraft were the primary equipment for the RME. The RME was originally conceived to be a shuttle deployed experiment. Shortly after program start, the Challenger disaster occurred, with the promise of extensive delays. A completely new space segment was to be designed incorporating a free-flying spacecraft. During the midphase of the program, a variety of launch vehicles were envisioned to replace the shuttle, requiring the BASD team to design accommodations for Delta, Atlas, and Titan, with a Delta launch being the final solution. The ground systems tracked the spacecraft and illuminated it with green and blue beacon lasers. The Payload Experiment Package (PEP) housed the bisection tracker, a key innovation central to the experiment. The bisection tracker acquired both beacons and controlled steerable mirrors to accomplish fine tracking of the two cooperative beacons. In the process, the relay mirror was precisely positioned to enable a successful relay of a third infrared laser between the two ground sites via the orbiting spacecraft. Many of the key technologies employed in the PEP were originally developed for Ball laser communications research and development programs and other laser pointing efforts. The WAVE sensor package, built by ATA and integrated by Ball, measured the vibrations of the optical base structure on which it was mounted. These spacecraft vibration data are critical to the accurate pointing of space laser communication terminals.

  2. Tandem mirror reactors

    International Nuclear Information System (INIS)

    Logan, B.G.; Barr, W.L.; Bender, D.J.

    1978-01-01

    We have made preliminary designs of tandem mirror fusion reactors burning D-T fuel and of fusion-fission (hybrid) tandem mirrors producing both fissile fuel and electricity. For the hybrid reactor, we find that by using stream-stabilized, 2XIIB-like plugs and by injecting 200-keV deuterium beams into a tritium-plasma target confined electrostatically in the solenoid (two-component operation), we obtain a useful Q (fusion power/injection power) near unity. The D-T tandem reactor parameters are optimized to obtain the minimum capital cost per kW(e) net. For $200/kW(e) of 1200-keV neutral beam injection power in the plugs and a solenoid cost of about $3 million per metre length, the optimum Q is near 5. To allow for more expensive injector costs, a higher D-T reactor Q of 10 is obtainable with either increased power output or decreased neutron wall loading. Fokker--Planck calculations show steady-state Q approximately 5 for D-D tandem reactors burning only deuterium fuel and its reaction products, with most of the charged-particle fusion power recovered in a direct converter

  3. Automotive Sensors and MEMS Technology

    Science.gov (United States)

    Nonomura, Yutaka

    - Automotive sensors are used for emission gas purification, energy conservation, car kinematic performance, safety and ITS (intelligent transportation system). The comparison of the sensor characteristics was made for their application area. Many kinds of the principles are applied for the sensors. There are two types of sensors, such as physical and chemical one. Many of the automotive sensors are physical type such as mechanical sensors. And a gas sensor is a chemical type. The sensors have been remarkably developed with the advancement of the MEMS (Micro Electro Mechanical Systems) technology. In this paper, gas, pressure, combustion pressure, acceleration, magnetic, and angular rate sensors for automotive use are explained with their features. The sensors are key devices to control cars in the engine, power train, chassis and safety systems. The environment resistance, long term reliability, and low cost are required for the automotive sensors. They are very hard to be resolved. However, the sensor technology contributes greatly to improving global environment, energy conservation, and safety. The applications of automotive sensors will be expanded with the automobile developments.

  4. A Nuclear Microbattery for MEMS Devices

    International Nuclear Information System (INIS)

    Blanchard, James; Henderson, Douglass; Lal, Amit

    2002-01-01

    This project was designed to demonstrate the feasibility of producing on-board power for MEMS devices using radioisotopes. MEMS is a fast growing field, with hopes for producing a wide variety of revolutionary applications, including ''labs on a chip,'' micromachined scanning tunneling microscopes, microscopic detectors for biological agents, microsystems for DNA identification, etc. Currently, these applications are limited by the lack of an on-board power source. Research is ongoing to study approaches such as fuel cells, fossil fuels, and chemical batteries, but all these concepts have limitations. For long-lived, high energy density applications, on-board radioisotope power offers the best choice. We have succeeded in producing such devices using a variety of isotopes, incorporation methods, and device geometries. These experiments have demonstrated the feasibility of using radioisotope power and that there are a variety of options available for MEMS designers. As an example of an integrated, self-powered application, we have created an oscillating cantilever beam that is capable of consistent, periodic oscillations over very long time periods without the need for refueling. Ongoing work will demonstrate that this cantilever is capable of radio frequency transmission, allowing MEMS devices to communicate with one another wirelessly. Thus, this will be the first self-powered wireless transmitter available for use in MEMS devices, permitting such applications as sensors embedded in buildings for continuous monitoring of the building performance and integrity

  5. Research on large-aperture primary mirror supporting way of vehicle-mounted laser communication system

    Science.gov (United States)

    Meng, Lixin; Meng, Lingchen; Zhang, Yiqun; Zhang, Lizhong; Liu, Ming; Li, Xiaoming

    2018-01-01

    In the satellite to earth laser communication link, large-aperture ground laser communication terminals usually are used in order to realize the requirement of high rate and long distance communication and restrain the power fluctuation by atmospheric scintillation. With the increasing of the laser communication terminal caliber, the primary mirror weight should also be increased, and selfweight, thermal deformation and environment will affect the surface accuracy of the primary mirror surface. A high precision vehicular laser communication telescope unit with an effective aperture of 600mm was considered in this paper. The primary mirror is positioned with center hole, which back is supported by 9 floats and the side is supported by a mercury band. The secondary mirror adopts a spherical adjusting mechanism. Through simulation analysis, the system wave difference is better than λ/20 when the primary mirror is in different dip angle, which meets the requirements of laser communication.

  6. TCV mirrors cleaned by plasma

    Directory of Open Access Journals (Sweden)

    L. Marot

    2017-08-01

    Full Text Available Metallic mirrors exposed in TCV tokamak were cleaned by plasma in laboratory. A gold (Au mirror was deposited with 185–285nm of amorphous carbon (aC:D film coming from the carbon tiles of TCV. Another molybdenum (Mo mirror had a thicker deposit due to a different location within the tokamak. The thickness measurements were carried out using ellipsometry and the reflectivity measurements performed by spectrophotometry revealed a decrease of the specular reflectivity in the entire range (250–2500nm for the Mo mirror and specifically in the visible spectrum for the Au. Comparison of the simulated reflectivity using a refractive index of 1.5 and a Cauchy model for the aC:D gives good confidence on the estimated film thickness. Plasma cleaning using radio frequency directly applied to a metallic plate where the mirrors were fixed demonstrated the ability to remove the carbon deposits. A mixture of 50% hydrogen and 50% helium was used with a −200V self-bias. Due to the low sputtering yield of He and the low chemical erosion of hydrogen leading to volatile molecules, 20h of cleaning were needed for Au mirror and more than 60h for Mo mirror. Recovery of the reflectivity was not complete for the Au mirror most likely due to damage of the surface during tokamak exposure (breakdown phenomena.

  7. Acoustic Models of Optical Mirrors

    Science.gov (United States)

    Mayer, V. V.; Varaksina, E. I.

    2014-01-01

    Students form a more exact idea of the action of optical mirrors if they can observe the wave field being formed during reflection. For this purpose it is possible to organize model experiments with flexural waves propagating in thin elastic plates. The direct and round edges of the plates are used as models of plane, convex and concave mirrors.…

  8. Negative Reflecting Meta-Mirrors.

    Science.gov (United States)

    Yang, Rui; Li, Dong; Gao, Dongxing; Zhang, Aofang; Hu, Bowei; Yang, Pei; Lei, Zhenya; Li, Jiacheng

    2017-07-18

    Using the gradient phase discontinuities that meta-mirrors provide, we show that the incident wave can be reflected anomalously with a broad angle range of negative reflections. Such reversed behaviors promote the immediate applications for the planar meta-mirrors to steer the signals more arbitrarily and the convex meta-mirrors to focus and collimate electromagnetic fields. We practically implement these negative reflecting meta-mirrors through an arrangement of subwavelength ring patches and generate the desired phase distribution by also considering the incident angle. Finally, the experiments are carried out to verify the functionality of the convex meta-mirror firstly, and the performances of the planar meta-mirror are also tested by further building up a dual reflector system with the demonstration of obtaining the plane wave from the convex meta-mirror and then having the well collimated beam negative reflected by the planar meta-mirror. The proposed design should be readily applicable to a wide range of electromagnetic problems, especially for devising smart planar illusion devices, and highly directive antennas mounting on convex surfaces of various platforms.

  9. Eliminating mirror responses by instructions.

    Science.gov (United States)

    Bardi, Lara; Bundt, Carsten; Notebaert, Wim; Brass, Marcel

    2015-09-01

    The observation of an action leads to the activation of the corresponding motor plan in the observer. This phenomenon of motor resonance has an important role in social interaction, promoting imitation, learning and action understanding. However, mirror responses not always have a positive impact on our behavior. An automatic tendency to imitate others can introduce interference in action execution and non-imitative or opposite responses have an advantage in some contexts. Previous studies suggest that mirror tendencies can be suppressed after extensive practice or in complementary joint action situations revealing that mirror responses are more flexible than previously thought. The aim of the present study was to gain insight into the mechanisms that allow response flexibility of motor mirroring. Here we show that the mere instruction of a counter-imitative mapping changes mirror responses as indexed by motor evoked potentials (MEPs) enhancement induced by transcranial magnetic stimulation (TMS). Importantly, mirror activation was measured while participants were passively watching finger movements, without having the opportunity to execute the task. This result suggests that the implementation of task instructions activates stimulus-response association that can overwrite the mirror representations. Our outcome reveals one of the crucial mechanisms that might allow flexible adjustments of mirror responses in different contexts. The implications of this outcome are discussed. Copyright © 2015 Elsevier Ltd. All rights reserved.

  10. [Mirror therapy in hemiplegic patient].

    Science.gov (United States)

    Lisalde-Rodríguez, María Elena; Garcia-Fernández, José Antonio

    2016-01-01

    Mirror therapy is a relatively new intervention, every time more used and with easy access for the rehabilitation treatment of stroke patient. The patient moves the unaffected limb in front of a mirror watching the reflection of that move as if he was moving de affected limb. To analyze the effectiveness of mirror therapy in the sensorimotor function, hemineglect and activities of daily living of stroke patients. We defined a strategy of bibliography search in Medline, EMBASE, PEDro y Cochrane Central Register of Controlled Trials (CENTRAL) looking for randomised controlled trials (RCT) conducted with hemiplegic patients considering mirror therapy as the main rehabilitation intervention. Seven trials met the inclusion criteria with medium-high methodological quality. Most of them evaluate the mirror therapy effect on motor outcomes showing significant improvements. Three of this RCTs evaluate the effect of mirror therapy on the hemineglect with positive result. A combination of mirror therapy with conventional rehabilitation obtained significant improvements mainly in motor function but not that much on sensory function and functional performance. About the effect of mirror therapy on hemineglect, there are significant improvements but supported only with a few RCTs with small sample sizes producing promising but inconclusive results.

  11. Mirroring patients – or not

    DEFF Research Database (Denmark)

    Davidsen, Annette Sofie; Fosgerau, Christina Fogtmann

    2015-01-01

    and acoustic features of speech. GPs mirrored their patients more than psychiatrists in all modalities and were more flexible in their interactional behaviour. Psychiatrists seemed more static, regardless of the emotionality displayed by patients. Implicitly mirroring and attuning to patients could signify...

  12. A study on role of nanosized SiO2 on deformation mechanism of ...

    Indian Academy of Sciences (India)

    more brittle, the amount of plastic deformation will reduce, and, therefore, the extent of mirror zone will decrease. In other words, if the initial crack has long dispread time, it increases the extent of mirror zone (Zebarjad et al 2008). By comparing the SEM photographs of fabricated nano- composite and neat resin fracture ...

  13. Introduction to tandem mirror physics

    International Nuclear Information System (INIS)

    Kesner, J.; Gerver, M.J.; Lane, B.G.; McVey, B.D.; Catto, P.J.; D'Ippolito, D.A.; Myra, J.R.

    1983-09-01

    This monograph, prepared jointly by the MIT Plasma Fusion Center Mirror Fusion group and SAI, Boulder, Colorado, presents a review of the development of mirror fusion theory from its conception some thirty years ago to the present. Pertinent historic experiments and their contribution are discussed to set the stage for a detailed analysis of current experiments and the problems which remain to be solved in bringing tandem mirror magnetic confinement fusion to fruition. In particular, Chapter III discusses in detail the equilibrium and stability questions which must be dealt with before tandem mirror reactors become feasible, while Chapters IV and V discuss some of the current machines and those under construction which will help to resolve critical issues in both physics and engineering whose solutions are necessary to the commercialization of tandem mirror fusion

  14. LLL mirror fusion program: summary

    International Nuclear Information System (INIS)

    Fowler, T.K.

    1977-01-01

    During 1976, new Mirror Program plans have been laid out to take into account the significant advances during the last 18 months. The program is now focused on two new mirror concepts, field reversal and the tandem mirror, that can obtain high Q, defined as the ratio of fusion power output to the neutral-beam power injected to sustain the reaction. Theoretically, both concepts can attain Q = 5 or more, as compared to Q = 1 in previous mirror designs. Experimental planning for the next 5 years is complete in broad outline, and we are turning attention to what additional steps are necessary to reach our long-range goal of an experimental mirror reactor operating by 1990. Highlights of the events that have led to the above circumstance are listed, and experimental program plans are outlined

  15. Development of a Two-Dimensional Array of Individually Addressable Micro-Mirrors for NGST Application

    Science.gov (United States)

    Dutta, S. B.; Mott, D. B.; Allen, C. A.; Ewin, A. J.; Jhabvala, M. D.; Kotecki, C. A.; Kuhn, J. L.; MacKenty, J. W.

    2000-05-01

    NASA's missions of the 21st century will use small, low cost, efficient instruments for Earth and Space Science studies. Development of technologies that accommodate these requirements is essential for space applications. Micro Electro Mechanical Systems (MEMS) technology development for sensors and actuators plays a major role in this effort. We are developing a two dimensional array of individually addressable, cryogenic micro-mirrors, a MEMS based component, specifically for application in the Multi Object Spectrometer (MOS) in NGST. Two-dimensional, individually addressable and tiltable aluminum micro-mirror-arrays (MMA) have been developed and prototype arrays of different sizes have been fabricated in the Detector Development Laboratory of NASA, GSFC. Each micro-mirror of the array has 100micronx100micron pixel size and is capable of tilting +/- 10 degrees by electrostatic actuation. We have completed extensive analytical studies and performed laboratory tests to compare model predictions with actual performance of a 3x3 array. The mirrors have been tested to operate at cryogenic temperature. Recently we have completed the integration of a CMOS based address and driver circuit for the MMA with its mechanical structure. Our goal is to extend the development to a 1024x1024 array, primarily for NGST and also for other imaging and spectroscopy applications. For NGST MOS, MMAs will be used as a reflective slit-mask at a focal plane of the spectrometer providing a large field of view together with diffraction limited angular resolution for a grating spectrometer. Selected areas of the mirror-array will be tilted to select portions of the scene so that observation of up to 1000 simultaneous spectra of sparse targets will be possible. This provides a factor of 100 improvement in observing speed over conventional spectrometers. Details of the technology development along with its application to NGST will be discussed. This work is supported by the GSFC Director

  16. IC-Compatible Technologies for Optical MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Krygowski, T.W.; Sniegowski, J.J.

    1999-04-30

    Optical Micro Electro Mechanical Systems (Optical MEMS) Technology holds the promise of one-day producing highly integrated optical systems on a common, monolithic substrate. The choice of fabrication technology used to manufacture Optical MEMS will play a pivotal role in the size, functionality and ultimately the cost of optical Microsystems. By leveraging the technology base developed for silicon integrated circuits, large batches of routers, emitters, detectors and amplifiers will soon be fabricated for literally pennies per part. In this article we review the current status of technologies used for Optical MEMS, as well as fabrication technologies of the future, emphasizing manufacturable surface micromachining approaches to producing reliable, low-cost devices for optical communications applications.

  17. MEMS tunable grating micro-spectrometer

    Science.gov (United States)

    Tormen, Maurizio; Lockhart, R.; Niedermann, P.; Overstolz, T.; Hoogerwerf, A.; Mayor, J.-M.; Pierer, J.; Bosshard, C.; Ischer, R.; Voirin, G.; Stanley, R. P.

    2017-11-01

    The interest in MEMS based Micro-Spectrometers is increasing due to their potential in terms of flexibility as well as cost, low mass, small volume and power savings. This interest, especially in the Near-Infrared and Mid- Infrared, ranges from planetary exploration missions to astronomy, e.g. the search for extra solar planets, as well as to many other terrestrial fields of application such as, industrial quality and surface control, chemical analysis of soil and water, detection of chemical pollutants, exhausted gas analysis, food quality control, process control in pharmaceuticals, to name a few. A compact MEMS-based Spectrometer for Near- Infrared and Mid-InfraRed operation have been conceived, designed and demonstrated. The design based on tunable MEMS blazed grating, developed in the past at CSEM [1], achieves state of the art results in terms of spectral resolution, operational wavelength range, light throughput, overall dimensions, and power consumption.

  18. Vortex Anemometer Using MEMS Cantilever Sensor

    CERN Document Server

    Zylka, P; Zylka, Pawel; Modrzynski, Pawel

    2010-01-01

    This paper presents construction and performance of a novel hybrid microelectromechanical system (MEMS) vortex flowmeter. A miniature cantilever MEMS displacement sensor was used to detect frequency of vortices development. 3-mm-long silicon cantilever, protruding directly out of a trailing edge of a trapezoidal glass-epoxy composite bluff body was put into oscillatory motion by vortices shed alternately from side surfaces of the obstacle. Verified linearmeasurement range of the device extended from 5 to 22 m/s; however, it could be broadened in absence of external 50-Hz mains electrical interfering signal which required bandpass frequency-domain digital sensor signal processing. The MEMS vortex sensor proved its effectiveness in detection of semilaminar airflow velocity distribution in a 40-mm-diameter tubular pipe.

  19. Mirror symmetry, toric branes and topological string amplitudes as polynomials

    International Nuclear Information System (INIS)

    Alim, Murad

    2009-01-01

    The central theme of this thesis is the extension and application of mirror symmetry of topological string theory. The contribution of this work on the mathematical side is given by interpreting the calculated partition functions as generating functions for mathematical invariants which are extracted in various examples. Furthermore the extension of the variation of the vacuum bundle to include D-branes on compact geometries is studied. Based on previous work for non-compact geometries a system of differential equations is derived which allows to extend the mirror map to the deformation spaces of the D-Branes. Furthermore, these equations allow the computation of the full quantum corrected superpotentials which are induced by the D-branes. Based on the holomorphic anomaly equation, which describes the background dependence of topological string theory relating recursively loop amplitudes, this work generalizes a polynomial construction of the loop amplitudes, which was found for manifolds with a one dimensional space of deformations, to arbitrary target manifolds with arbitrary dimension of the deformation space. The polynomial generators are determined and it is proven that the higher loop amplitudes are polynomials of a certain degree in the generators. Furthermore, the polynomial construction is generalized to solve the extension of the holomorphic anomaly equation to D-branes without deformation space. This method is applied to calculate higher loop amplitudes in numerous examples and the mathematical invariants are extracted. (orig.)

  20. Mirror symmetry, toric branes and topological string amplitudes as polynomials

    Energy Technology Data Exchange (ETDEWEB)

    Alim, Murad

    2009-07-13

    The central theme of this thesis is the extension and application of mirror symmetry of topological string theory. The contribution of this work on the mathematical side is given by interpreting the calculated partition functions as generating functions for mathematical invariants which are extracted in various examples. Furthermore the extension of the variation of the vacuum bundle to include D-branes on compact geometries is studied. Based on previous work for non-compact geometries a system of differential equations is derived which allows to extend the mirror map to the deformation spaces of the D-Branes. Furthermore, these equations allow the computation of the full quantum corrected superpotentials which are induced by the D-branes. Based on the holomorphic anomaly equation, which describes the background dependence of topological string theory relating recursively loop amplitudes, this work generalizes a polynomial construction of the loop amplitudes, which was found for manifolds with a one dimensional space of deformations, to arbitrary target manifolds with arbitrary dimension of the deformation space. The polynomial generators are determined and it is proven that the higher loop amplitudes are polynomials of a certain degree in the generators. Furthermore, the polynomial construction is generalized to solve the extension of the holomorphic anomaly equation to D-branes without deformation space. This method is applied to calculate higher loop amplitudes in numerous examples and the mathematical invariants are extracted. (orig.)

  1. Improvements in analysis techniques for segmented mirror arrays

    Science.gov (United States)

    Michels, Gregory J.; Genberg, Victor L.; Bisson, Gary R.

    2016-08-01

    The employment of actively controlled segmented mirror architectures has become increasingly common in the development of current astronomical telescopes. Optomechanical analysis of such hardware presents unique issues compared to that of monolithic mirror designs. The work presented here is a review of current capabilities and improvements in the methodology of the analysis of mechanically induced surface deformation of such systems. The recent improvements include capability to differentiate surface deformation at the array and segment level. This differentiation allowing surface deformation analysis at each individual segment level offers useful insight into the mechanical behavior of the segments that is unavailable by analysis solely at the parent array level. In addition, capability to characterize the full displacement vector deformation of collections of points allows analysis of mechanical disturbance predictions of assembly interfaces relative to other assembly interfaces. This capability, called racking analysis, allows engineers to develop designs for segment-to-segment phasing performance in assembly integration, 0g release, and thermal stability of operation. The performance predicted by racking has the advantage of being comparable to the measurements used in assembly of hardware. Approaches to all of the above issues are presented and demonstrated by example with SigFit, a commercially available tool integrating mechanical analysis with optical analysis.

  2. MEMS reliability: The challenge and the promise

    Energy Technology Data Exchange (ETDEWEB)

    Miller, W.M.; Tanner, D.M.; Miller, S.L.; Peterson, K.A.

    1998-05-01

    MicroElectroMechanical Systems (MEMS) that think, sense, act and communicate will open up a broad new array of cost effective solutions only if they prove to be sufficiently reliable. A valid reliability assessment of MEMS has three prerequisites: (1) statistical significance; (2) a technique for accelerating fundamental failure mechanisms, and (3) valid physical models to allow prediction of failures during actual use. These already exist for the microelectronics portion of such integrated systems. The challenge lies in the less well understood micromachine portions and its synergistic effects with microelectronics. This paper presents a methodology addressing these prerequisites and a description of the underlying physics of reliability for micromachines.

  3. Enabling technology for MEMS and nanodevices

    CERN Document Server

    Baltes, Henry; Fedder, Gary K; Hierold, Christofer; Korvink, Jan G; Tabata, Osamu

    2013-01-01

    This softcover edition of the eponymous volume from the successful ""Advanced Micro & Nanosystems"" series covers all aspects of fabrication of MEMS under CMOS-compatible conditions from design to implementation.It examines the various routes and methods to combine electronics generated by the CMOS technology with novel micromechanical parts into one-chip solutions. Various approaches, fundamental and technological aspects as well as strategies leading to different types of functionalities and presented in detail.For the practicing engineer as well as MSc and PhD students on MEMS cours

  4. Hermeticity testing of MEMS and microelectronic packages

    CERN Document Server

    Costello, Suzanne

    2013-01-01

    Packaging of microelectronics has been developing since the invention of the transistor in 1947. With the increasing complexity and decreasing size of the die, packaging requirements have continued to change. A step change in package requirements came with the introduction of the Micro-Electro-Mechanical System (MEMS) whereby interactions with the external environment are, in some cases, required.This resource is a rapid, definitive reference on hermetic packaging for the MEMS and microelectronics industry, giving practical guidance on traditional and newly developed test methods. This book in

  5. Liquid Tunable Microlenses based on MEMS techniques

    Science.gov (United States)

    Zeng, Xuefeng; Jiang, Hongrui

    2013-01-01

    The recent rapid development in microlens technology has provided many opportunities for miniaturized optical systems, and has found a wide range of applications. Of these microlenses, tunable-focus microlenses are of special interest as their focal lengths can be tuned using micro-scale actuators integrated with the lens structure. Realization of such tunable microlens generally relies on the microelectromechanical system (MEMS) technologies. Here, we review the recent progress in tunable liquid microlenses. The underlying physics relevant to these microlenses are first discussed, followed by description of three main categories of tunable microlenses involving MEMS techniques, mechanically driven, electrically driven, and those integrated within microfluidic systems. PMID:24163480

  6. RF MEMS theory, design, and technology

    CERN Document Server

    Rebeiz, Gabriel M

    2003-01-01

    Ultrasmall Radio Frequency and Micro-wave Microelectromechanical systems (RF MEMs), such as switches, varactors, and phase shifters, exhibit nearly zero power consumption or loss. For this reason, they are being developed intensively by corporations worldwide for use in telecommunications equipment. This book acquaints readers with the basics of RF MEMs and describes how to design practical circuits and devices with them. The author, an acknowledged expert in the field, presents a range of real-world applications and shares many valuable tricks of the trade.

  7. Design for an aberration corrected scanning electron microscope using miniature electron mirrors.

    Science.gov (United States)

    Dohi, Hideto; Kruit, Pieter

    2018-03-07

    Resolution of scanning electron microscopes (SEMs) is determined by aberrations of the objective lens. It is well known that both spherical and chromatic aberrations can be compensated by placing a 90-degree bending magnet and an electron mirror in the beam path before the objective lens. Nevertheless, this approach has not led to wide use of these aberration correctors, partly because aberrations of the bending magnet can be a serious problem. A mirror corrector with two mirrors placed perpendicularly to the optic axis of an SEM and facing each other is proposed. As a result, only small-angle magnetic deflection is necessary to guide the electron beam around the top mirror to the bottom mirror and around the bottom mirror to the objective lens. The deflection angle, in the order of 50 mrad, is sufficiently small to avoid deflection aberrations. In addition, lateral dispersion at the sample plane can be avoided by making the deflection fields symmetric. Such a corrector system is only possible if the incoming beam can pass the top mirror at a distance in the order of millimeters, without being disturbed by the electric fields of electrodes of the mirror. It is proposed that condition can be satisfied with micro-scale electron optical elements fabricated by using MEMS technology. In the proposed corrector system, the micro-mirrors have to provide the exact negative spherical and chromatic aberrations for correcting the aberration of the objective lens. This exact tuning is accomplished by variable magnification between the micro-mirrors and the objective lens using an additional transfer lens. Extensive optical calculations are reported. Aberrations of the micro-mirrors were analyzed by numerical calculation. Dispersion and aberrations of the deflectors were calculated by using an analytical field model. Combination aberrations caused by the off-axis position of dispersive rays in the mirrors and objective lens were also analyzed. It is concluded that the proposed

  8. Review of Automated Design and Optimization of MEMS

    DEFF Research Database (Denmark)

    Achiche, Sofiane; Fan, Zhun; Bolognini, Francesca

    2007-01-01

    carried out. This paper presents a review of these techniques. The design task of MEMS is usually divided into four main stages: System Level, Device Level, Physical Level and the Process Level. The state of the art o automated MEMS design in each of these levels is investigated.......In recent years MEMS saw a very rapid development. Although many advances have been reached, due to the multiphysics nature of MEMS, their design is still a difficult task carried on mainly by hand calculation. In order to help to overtake such difficulties, attempts to automate MEMS design were...

  9. Electrostatic field in terms of geometric curvature in membrane MEMS devices

    Directory of Open Access Journals (Sweden)

    Di Barba Paolo

    2017-03-01

    Full Text Available In this paper we present, in a framework of 1D-membrane Micro-Electro-Mechanical- Systems (MEMS theory, a formalization of the problem of existence and uniqueness of a solution related to the membrane deformation u for electrostatic actuation in the steady- state case. In particular, we propose a new model in which the electric field magnitude E is proportional to the curvature of the membrane and, for it, we obtain results of existence by Schauder-Tychono's fixed point application and subsequently we establish conditions of uniqueness. Finally, some numerical tests have been carried out to further support the analytical results.

  10. Advanced Mirror & Modelling Technology Development

    Science.gov (United States)

    Effinger, Michael; Stahl, H. Philip; Abplanalp, Laura; Maffett, Steven; Egerman, Robert; Eng, Ron; Arnold, William; Mosier, Gary; Blaurock, Carl

    2014-01-01

    The 2020 Decadal technology survey is starting in 2018. Technology on the shelf at that time will help guide selection to future low risk and low cost missions. The Advanced Mirror Technology Development (AMTD) team has identified development priorities based on science goals and engineering requirements for Ultraviolet Optical near-Infrared (UVOIR) missions in order to contribute to the selection process. One key development identified was lightweight mirror fabrication and testing. A monolithic, stacked, deep core mirror was fused and replicated twice to achieve the desired radius of curvature. It was subsequently successfully polished and tested. A recently awarded second phase to the AMTD project will develop larger mirrors to demonstrate the lateral scaling of the deep core mirror technology. Another key development was rapid modeling for the mirror. One model focused on generating optical and structural model results in minutes instead of months. Many variables could be accounted for regarding the core, face plate and back structure details. A portion of a spacecraft model was also developed. The spacecraft model incorporated direct integration to transform optical path difference to Point Spread Function (PSF) and between PSF to modulation transfer function. The second phase to the project will take the results of the rapid mirror modeler and integrate them into the rapid spacecraft modeler.

  11. Tandem mirror and field-reversed mirror experiments

    Energy Technology Data Exchange (ETDEWEB)

    Coensgen, F.H.; Simonen, T.C.; Turner, W.C.

    1979-08-21

    This paper is largely devoted to tandem mirror and field-reversed mirror experiments at the Lawrence Livermore Laboratory (LLL), and briefly summarizes results of experiments in which field-reversal has been achieved. In the tandem experiment, high-energy, high-density plasmas (nearly identical to 2XIIB plasmas) are located at each end of a solenoid where plasma ions are electrostatically confined by the high positive poentials arising in the end plug plasma. End plug ions are magnetically confined, and electrons are electrostatically confined by the overall positive potential of the system. The field-reversed mirror reactor consists of several small field-reversed mirror plasmas linked together for economic reasons. In the LLL Beta II experiment, generation of a field-reversed plasma ring will be investigated using a high-energy plasma gun with a transverse radial magnetic field. This plasma will be further heated and sustained by injection of intense, high-energy neutral beams.

  12. A Widely-Accessible Distributed MEMS Processing Environment. The MEMS Exchange Program

    Science.gov (United States)

    2012-10-29

    steadily rising for several years, our revenue began to drop in 2009, we think mostly due to the bad economy. In years past we would normally see a...the MEMS Materials and Processing Handbook, editors R. Ghodssi and P. Lin, Springer Press, New York, 2011. [3] BioMEMS and Biomaterials for...Medical Applications Biomaterials Science: An Integrated Clinical and Engineering Approach, edited by Yitzhak Rosen and Noel Elman, CRC Press, Boca

  13. Finite element based contact analysis of radio frequency MEMs switch membrane surfaces

    Science.gov (United States)

    Liu, Jin-Ya; Chalivendra, Vijaya; Huang, Wenzhen

    2017-10-01

    Finite element simulations were performed to determine the contact behavior of radio frequency (RF) micro-electro-mechanical (MEM) switch contact surfaces under monotonic and cyclic loading conditions. Atomic force microscopy (AFM) was used to capture the topography of RF-MEM switch membranes and later they were analyzed for multi-scale regular as well as fractal structures. Frictionless, non-adhesive contact 3D finite element analysis was carried out at different length scales to investigate the contact behavior of the regular-fractal surface using an elasto-plastic material model. Dominant micro-scale regular patterns were found to significantly change the contact behavior. Contact areas mainly cluster around the regular pattern. The contribution from the fractal structure is not significant. Under cyclic loading conditions, plastic deformation in the 1st loading/unloading cycle smooth the surface. The subsequent repetitive loading/unloading cycles undergo elastic contact without changing the morphology of the contacting surfaces. The work is expected to shed light on the quality of the switch surface contact as well as the optimum design of RF MEM switch surfaces.

  14. A study on the cellular structure during stress solicitation induced by BioMEMS.

    Science.gov (United States)

    Fior, Raffaella; Maggiolino, Stefano; Codan, Barbara; Lazzarino, Marco; Sbaizero, Orfeo

    2011-01-01

    The investigation of single cells is a topic in continuous evolution. The complexity of the cellular matrix, the huge variety of cells, the interaction of one cell with the other are all factors that must be taken into consideration in the study of the cellular structure and mechanics. In this project, we developed different types of bioMEMS for cell's stretching, both transparent devices based on silicon nitride and non-transparent silicon based. While the use of silicon devices is limited to reflection microscopes, transparent bioMEMS can be used with transmission and reflection microscopes but can also be easily coupled with other tools such as patch clamp analyzers or atomic force microscope. This improvement will open brand new possibilities in the biological investigation field. We used these two BioMEMS to stretch a single cell in a controlled way and, as a first investigation, we focused on its morphology. We noticed that during a controlled stretch, cells react to the applied deformation. A hysteretic behavior on the ratio between area and perimeter has been highlighted.

  15. Impact of environmental conditions on the reliability of MEMS components from optical applications

    Directory of Open Access Journals (Sweden)

    Pustan Marius

    2017-01-01

    Full Text Available The reliability design and the lifetime of MEMS from optical applications is strongly dependent on the operating conditions. In optical devices an additional stress is introduced by the temperature gradient appearing during operation. The thermal stress introduced in the structure modifies the component response and its lifetime. The investigated sample is a micromirror fabricated from gold using the MEMS technologies and tested by an atomic force microscope. The scope is to analyse the temperature and relative humidity influence on the mechanical and tribological behaviours. Using a mechanical force given by the bending deflection and stiffness of the AFM probe, the dependence between the applied force and the micromirror deformation is monitored as a function of temperature. By increasing the temperature of structures the stiffness decreases based on the thermal relaxation of the material. If the relative humidity increases the adhesion between the micromirror and substrate is improved based on the capillarity effect. The results obtained are useful to MEMS designers who can predict the micromirror response as a function of the operating conditions with influence on the actuation energy, the accuracy in response and the system lifetime.

  16. Design and simulation of the surface shape control system for membrane mirror

    Science.gov (United States)

    Zhang, Gengsheng; Tang, Minxue

    2009-11-01

    The surface shape control is one of the key technologies for the manufacture of membrane mirror. This paper presents a design of membrane mirror's surface shape control system on the basis of fuzzy logic control. The system contains such function modules as surface shape design, surface shape control, surface shape analysis, and etc. The system functions are realized by using hybrid programming technology of Visual C# and MATLAB. The finite element method is adopted to simulate the surface shape control of membrane mirror. The finite element analysis model is established through ANSYS Parametric Design Language (APDL). ANSYS software kernel is called by the system in background running mode when doing the simulation. The controller is designed by means of controlling the sag of the mirror's central crosssection. The surface shape of the membrane mirror and its optical aberration are obtained by applying Zernike polynomial fitting. The analysis of surface shape control and the simulation of disturbance response are performed for a membrane mirror with 300mm aperture and F/2.7. The result of the simulation shows that by using the designed control system, the RMS wavefront error of the mirror can reach to 142λ (λ=632.8nm), which is consistent to the surface accuracy of the membrane mirror obtained by the large deformation theory of membrane under the same condition.

  17. Characterization of dielectric charging in RF MEMS

    NARCIS (Netherlands)

    Herfst, R.W.; Huizing, H.G.A.; Steeneken, P.G.; Schmitz, Jurriaan

    2005-01-01

    Capacitive RF MEMS switches show great promise for use in wireless communication devices such as mobile phones, but the successful application of these switches is hindered by the reliability of the devices: charge injection in the dielectric layer (SiN) can cause irreversible stiction of the moving

  18. Characterization of piezoelectric polymer composites for MEMS ...

    Indian Academy of Sciences (India)

    Abstract. Composite piezoelectric ceramics are important materials for transducer applications in medical diag- nostic devices and MEMS devices. In micrometer scale the material properties of piezopolymers or piezoceramics do not coincide with that of bulk materials. The present work is aimed at simulating the material ...

  19. From MEMS to NEMS : Scaling Cantilever Sensors

    NARCIS (Netherlands)

    Yang, C.K.

    2012-01-01

    This thesis studies the effects of scaling on the characterisation and readout of micro-electro mechanical systems (MEMS) to nano-electro mechanical systems (NEMS). In particular it focuses on cantilever, which is a basic device building block and an important transducer in many sensing

  20. Bullet Design of MEMS Cantilever - Hand Calculation

    Directory of Open Access Journals (Sweden)

    Abhijeet V. KSHIRSAGAR

    2008-04-01

    Full Text Available The present article describes the basic hand calculations for design of MEMS cantilever for beginners. The MATLAB software code was written to analysis the all formulae. Further the article gives insight of important parameters, its dependence and consideration for a good design.

  1. Fractal Structures For Mems Variable Capacitors

    KAUST Repository

    Elshurafa, Amro M.

    2014-08-28

    In accordance with the present disclosure, one embodiment of a fractal variable capacitor comprises a capacitor body in a microelectromechanical system (MEMS) structure, wherein the capacitor body has an upper first metal plate with a fractal shape separated by a vertical distance from a lower first metal plate with a complementary fractal shape; and a substrate above which the capacitor body is suspended.

  2. Novel RF-MEMS capacitive switching structures

    NARCIS (Netherlands)

    Rottenberg, X.; Jansen, Henricus V.; Fiorini, P.; De Raedt, W.; Tilmans, H.A.C.

    2002-01-01

    This paper reports on novel RF-MEMS capacitive switching devices implementing an electrically floating metal layer covering the dielectric to ensure intimate contact with the bridge in the down state. This results in an optimal switch down capacitance and allows optimisation of the down/up

  3. Review on the Modeling of Electrostatic MEMS

    Science.gov (United States)

    Chuang, Wan-Chun; Lee, Hsin-Li; Chang, Pei-Zen; Hu, Yuh-Chung

    2010-01-01

    Electrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduces the physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices. PMID:22219707

  4. MEMS Piezoresistive Pressure Sensor: A Survey

    OpenAIRE

    Shwetha Meti; Kirankumar B. Balavald; B. G. Sheeparmatti

    2016-01-01

    Piezoresistive pressure sensors are one of the very first products of MEMS technology, and are used in various fields like automotive industries, aerospace, biomedical applications, and household appliances. Amongst various transduction principles of pressure sensor piezoresistive transduction mechanism is widely used. Over a decade therehas been tremendous improvement in the development of the design of piezoresistive pressure sensor starting with the invention of piezoresistance...

  5. SiC MEMS For Harsh Environments

    National Research Council Canada - National Science Library

    Bradley, Kenneth

    2003-01-01

    This document is the final technical report for the SiC MEMS for Harsh Environments in-house research program jointly coordinated between AFRL/MNMF and AFRL/MLPS, and addresses the benefits of silicon carbide (SiC...

  6. Stabilized thermally compensated mirror

    International Nuclear Information System (INIS)

    Dunn, C. III; Tobin, R.D.; Bergstreser, N.E.; Heinz, T.A.

    1975-01-01

    A thermally compensated mirror is described that is formed by a laminated structure. The structure is comprised of a front plate having a reflective front surface and having a plurality of grooves formed in the rear surface for conducting coolant fluid in heat exchanging relation with said reflective surface, a rear plate having coolant inlet and coolant outlet openings extending therethrough, a minimum temperature plate interposed between said front and rear plates and formed with a plurality of coolant distribution passageways coupled to receive coolant fluid from said coolant inlet and oriented to distribute said coolant fluid in a manner to establish a minimum temperature plane parallel to said reflective surface, a temperature stabilization plate interposed between said front plate and said minimum temperature plate and formed with a plurality of coolant distribution channels coupled to receive said coolant fluid after said coolant fluid has passed in heat exchanging relation with said reflective surface and oriented to distribute said coolant fluid in a manner to establish a uniform temperature plane parallel to said reflective surface, and means for circulating said coolant fluid through said structure in a predetermined path. (U.S.)

  7. Tinbergen on mirror neurons.

    Science.gov (United States)

    Heyes, Cecilia

    2014-01-01

    Fifty years ago, Niko Tinbergen defined the scope of behavioural biology with his four problems: causation, ontogeny, survival value and evolution. About 20 years ago, there was another highly significant development in behavioural biology-the discovery of mirror neurons (MNs). Here, I use Tinbergen's original four problems (rather than the list that appears in textbooks) to highlight the differences between two prominent accounts of MNs, the genetic and associative accounts; to suggest that the latter provides the defeasible 'best explanation' for current data on the causation and ontogeny of MNs; and to argue that functional analysis, of the kind that Tinbergen identified somewhat misleadingly with studies of 'survival value', should be a high priority for future research. In this kind of functional analysis, system-level theories would assign MNs a small, but potentially important, role in the achievement of action understanding-or another social cognitive function-by a production line of interacting component processes. These theories would be tested by experimental intervention in human and non-human animal samples with carefully documented and controlled developmental histories.

  8. The magic of relay mirrors

    Science.gov (United States)

    Duff, Edward A.; Washburn, Donald C.

    2004-09-01

    Laser weapon systems would be significantly enhanced with the addition of high altitude or space-borne relay mirrors. Such mirrors, operating alone with a directed energy source, or many in a series fashion, can be shown to effectively move the laser source to the last, so-called fighting mirror. This "magically" reduces the range to target and offers to enhance the performance of directed energy systems like the Airborne Laser and even ground-based or ship-based lasers. Recent development of high altitude airships will be shown to provide stationary positions for such relay mirrors thereby enabling many new and important applications for laser weapons. The technical challenges to achieve this capability are discussed.

  9. Reflections on a Black Mirror

    OpenAIRE

    Good, Michael R. R.

    2016-01-01

    A black mirror is an accelerated boundary that produces particles in an exact correspondence to an evaporating black hole. We investigate the spectral dynamics of the particle creation during the formation process.

  10. MEMS Actuators for Improved Performance and Durability

    Science.gov (United States)

    Yearsley, James M.

    Micro-ElectroMechanical Systems (MEMS) devices take advantage of force-scaling at length scales smaller than a millimeter to sense and interact with directly with phenomena and targets at the microscale. MEMS sensors found in everyday devices like cell-phones and cars include accelerometers, gyros, pressure sensors, and magnetic sensors. MEMS actuators generally serve more application specific roles including micro- and nano-tweezers used for single cell manipulation, optical switching and alignment components, and micro combustion engines for high energy density power generation. MEMS rotary motors are actuators that translate an electric drive signal into rotational motion and can serve as rate calibration inputs for gyros, stages for optical components, mixing devices for micro-fluidics, etc. Existing rotary micromotors suffer from friction and wear issues that affect lifetime and performance. Attempts to alleviate friction effects include surface treatment, magnetic and electrostatic levitation, pressurized gas bearings, and micro-ball bearings. The present work demonstrates a droplet based liquid bearing supporting a rotary micromotor that improves the operating characteristics of MEMS rotary motors. The liquid bearing provides wear-free, low-friction, passive alignment between the rotor and stator. Droplets are positioned relative to the rotor and stator through patterned superhydrophobic and hydrophilic surface coatings. The liquid bearing consists of a central droplet that acts as the motor shaft, providing axial alignment between rotor and stator, and satellite droplets, analogous to ball-bearings, that provide tip and tilt stable operation. The liquid bearing friction performance is characterized through measurement of the rotational drag coefficient and minimum starting torque due to stiction and geometric effects. Bearing operational performance is further characterized by modeling and measuring stiffness, environmental survivability, and high

  11. Mirror Neurons from Associative Learning

    OpenAIRE

    Catmur, Caroline; Press, Clare; Heyes, Cecilia

    2016-01-01

    Mirror neurons fire both when executing actions and observing others perform similar actions. Their sensorimotor matching properties have generally been considered a genetic adaptation for social cognition; however, in the present chapter we argue that the evidence in favor of this account is not compelling. Instead we present evidence supporting an alternative account: that mirror neurons’ matching properties arise from associative learning during individual development. Notably, this proces...

  12. [Ballantyne syndrome or mirror syndrome].

    Science.gov (United States)

    Torres-Gómez, Luis Guillermo; Silva-González, María Eugenia; González-Hernández, Rigoberto

    2010-11-01

    Ballantyne syndrome or mirror syndrome is a triad consisting of the presence of fetal hydrops, generalized edema placentomegaly mother. May be related to any cause of fetal hydrops. The fetal prognosis is poor in untreated cases, the mother has reference to be the cause or the termination of pregnancy. Present the case of a 26-year-old who developed mirror syndrome secondary to non-immune fetal hydrops of unknown origin, accompanied by preeclampsia.

  13. EAGLE: relay mirror technology development

    Science.gov (United States)

    Hartman, Mary; Restaino, Sergio R.; Baker, Jeffrey T.; Payne, Don M.; Bukley, Jerry W.

    2002-06-01

    EAGLE (Evolutionary Air & Space Global Laser Engagement) is the proposed high power weapon system with a high power laser source, a relay mirror constellation, and the necessary ground and communications links. The relay mirror itself will be a satellite composed of two optically-coupled telescopes/mirrors used to redirect laser energy from ground, air, or space based laser sources to distant points on the earth or space. The receiver telescope captures the incoming energy, relays it through an optical system that cleans up the beam, then a separate transmitter telescope/mirror redirects the laser energy at the desired target. Not only is it a key component in extending the range of DoD's current laser weapon systems, it also enables ancillary missions. Furthermore, if the vacuum of space is utilized, then the atmospheric effects on the laser beam propagation will be greatly attenuated. Finally, several critical technologies are being developed to make the EAGLE/Relay Mirror concept a reality, and the Relay Mirror Technology Development Program was set up to address them. This paper will discuss each critical technology, the current state of the work, and the future implications of this program.

  14. Directly polished lightweight aluminum mirror

    Science.gov (United States)

    ter Horst, Rik; Tromp, Niels; de Haan, Menno; Navarro, Ramon; Venema, Lars; Pragt, Johan

    2017-11-01

    During the last ten years, Astron has been a major contractor for the design and manufacturing of astronomical instruments for Space- and Earth based observatories, such as VISIR, MIDI, SPIFFI, X-Shooter and MIRI. Driven by the need to reduce the weight of optically ultra-stiff structures, two promising techniques have been developed in the last years: ASTRON Extreme Lightweighting [1][2] for mechanical structures and an improved Polishing Technique for Aluminum Mirrors. Using one single material for both optical components and mechanical structure simplifies the design of a cryogenic instrument significantly, it is very beneficial during instrument test and verification, and makes the instrument insensitive to temperature changes. Aluminum has been the main material used for cryogenic optical instruments, and optical aluminum mirrors are generally diamond turned. The application of a polishable hard top coating like nickel removes excess stray light caused by the groove pattern, but limits the degree of lightweighting of the mirrors due to the bi-metal effect. By directly polishing the aluminum mirror surface, the recent developments at Astron allow for using a non-exotic material for light weighted yet accurate optical mirrors, with a lower surface roughness ( 1nm RMS), higher surface accuracy and reduced light scattering. This paper presents the techniques, obtained results and a global comparison with alternative lightweight mirror solutions. Recent discussions indicate possible extensions of the extreme light weight technology to alternative materials such as Zerodur or Silicon Carbide.

  15. Advances in telescope mirror cleaning

    Science.gov (United States)

    Blanken, Maarten F.; Chopping, Alan K.; Dee, Kevin M.

    2004-09-01

    Metrology and cleaning techniques for telescope mirrors are generally well established. CO2 cleaning and water washing are mainly used. Water washing has proven to be the best method of removing oil and water stains and restoring the aluminium to nearly fresh values. The risk of water getting to unwanted places such as electronics or other optics prevents this method from being employed more often. Recently the Isaac Newton Group introduced a new cleaning technique for their telescope mirrors, which reduces the risks discussed above. This technique uses water vapour instead of water to wash the mirror. The advantage of this method is that the amount of water needed is drastically reduced. In addition the pressure of the vapour will blow away any large dust particles on the mirror and the temperature shock between the vapour and the mirror will help to de-bond the dust particles. Adding a soapy solution will help to clean oil and watermarks of the mirror. This paper describes the vapour cleaning method, tests that have been done and the overall findings.

  16. Space Active Optics: toward optimized correcting mirrors for future large spaceborne observatories

    Science.gov (United States)

    Laslandes, Marie; Hugot, Emmanuel; Ferrari, Marc; Lemaitre, Gérard; Liotard, Arnaud

    2011-10-01

    Wave-front correction in optical instruments is often needed, either to compensate Optical Path Differences, off-axis aberrations or mirrors deformations. Active optics techniques are developed to allow efficient corrections with deformable mirrors. In this paper, we will present the conception of particular deformation systems which could be used in space telescopes and instruments in order to improve their performances while allowing relaxing specifications on the global system stability. A first section will be dedicated to the design and performance analysis of an active mirror specifically designed to compensate for aberrations that might appear in future 3m-class space telescopes, due to lightweight primary mirrors, thermal variations or weightless conditions. A second section will be dedicated to a brand new design of active mirror, able to compensate for given combinations of aberrations with a single actuator. If the aberrations to be corrected in an instrument and their evolutions are known in advance, an optimal system geometry can be determined thanks to the elasticity theory and Finite Element Analysis.

  17. Sandia Agile MEMS Prototyping, Layout Tools, Education and Services Program

    Energy Technology Data Exchange (ETDEWEB)

    Schriner, H.; Davies, B.; Sniegowski, J.; Rodgers, M.S.; Allen, J.; Shepard, C.

    1998-05-01

    Research and development in the design and manufacture of Microelectromechanical Systems (MEMS) is growing at an enormous rate. Advances in MEMS design tools and fabrication processes at Sandia National Laboratories` Microelectronics Development Laboratory (MDL) have broadened the scope of MEMS applications that can be designed and manufactured for both military and commercial use. As improvements in micromachining fabrication technologies continue to be made, MEMS designs can become more complex, thus opening the door to an even broader set of MEMS applications. In an effort to further research and development in MEMS design, fabrication, and application, Sandia National Laboratories has launched the Sandia Agile MEMS Prototyping, Layout Tools, Education and Services Program or SAMPLES program. The SAMPLES program offers potential partners interested in MEMS the opportunity to prototype an idea and produce hardware that can be used to sell a concept. The SAMPLES program provides education and training on Sandia`s design tools, analysis tools and fabrication process. New designers can participate in the SAMPLES program and design MEMS devices using Sandia`s design and analysis tools. As part of the SAMPLES program, participants` designs are fabricated using Sandia`s 4 level polycrystalline silicon surface micromachine technology fabrication process known as SUMMiT (Sandia Ultra-planar, Multi-level MEMS Technology). Furthermore, SAMPLES participants can also opt to obtain state of the art, post-fabrication services provided at Sandia such as release, packaging, reliability characterization, and failure analysis. This paper discusses the components of the SAMPLES program.

  18. Laser damage investigations of Cu mirrors

    International Nuclear Information System (INIS)

    Gorshkov, A.; Bel'bas, I.; Maslov, M.; Sannikov, V.; Vukolov, K.

    2005-01-01

    Laser tests were performed on Cu mirrors as 'first mirror' prototypes for laser diagnostics. Data on laser damage thresholds of surfaces under the influence of pulsed YAG laser radiation were obtained for single shot and after about 1.5 x 10 5 shots. The experiments were carried out using three types of copper mirrors: diamond-turned mirror, diamond-turned substrate with copper coating and reflection grating on a copper coated mirror. The lifetime of the copper mirrors was tested. Diffusion scattering was used as a monitor of mirror surface quality. The degradation of diamond turned copper mirrors in multiple pulse laser irradiation appears to be in satisfactory accordance with a model for multipulse laser damage of metal mirrors up to 1.5 x 10 5 laser pulses. The degradation of copper coated mirrors has a more complicated behaviour

  19. WGP structures patterned by Lloyd's mirror laser interference lithography system integrate into MEMS physical sensor device

    Science.gov (United States)

    Tseng, Kuo-Chun; Hong, Shuo-Ting; Lin, Te-Hsun; Chuang, Tzu-Han; Fu, Chien-Chung

    2016-03-01

    Wire-grid polarizers (WGPs) are composed of 1-D nanoscale periodic structures and are widely used in liquid crystal display devices to enhance the brightness and improve the utilization rate of the backlight source. This paper proposes the design and application of a WGP device for an microelectromechanical system physical force sensor derived through an optical measurement method. Infrared (IR) light was served as the signal source, with the initial angle set incident to the WGP, which was fabricated on microstructures such as cantilever beam, thin-film or bridge structures. According to the operation principle, when a physical force affects the microstructures, the incident angle of the signal light changes, which easily produces different transmission signal values for detection by an IR photodetector. Therefore, the proposed system can be used for optical contactless sensing in physical force sensing modules. Furthermore, the WGP structure introduced in this paper was defined using laser interference lithography and deposited with Al by E-beam evaporation.

  20. Study on a Two-Dimensional Scanning Micro-Mirror and Its Application in a MOEMS Target Detector

    Directory of Open Access Journals (Sweden)

    Hu Huang

    2010-07-01

    Full Text Available A two-dimensional (2D scanning micro-mirror for target detection and measurement has been developed. This new micro-mirror is used in a MOEMS target detector to replace the conventional scanning detector. The micro-mirror is fabricated by MEMS process and actuated by a piezoelectric actuator. To achieve large deflection angles, the micro-mirror is excited in the resonance modes. It has two degrees of freedom and changes the direction of the emitted laser beam for a regional 2D scanning. For the deflection angles measurement, piezoresistors are integrated in the micro-mirror and the deflection angles of each direction can be detected independently and precisely. Based on the scanning micro-mirror and the phase-shift ranging technology, a MOEMS target detector has been developed in a size of 90 mm × 35 mm × 50 mm. The experiment shows that the target can be detected in the scanning field and the relative range and orientation can be measured by the MOEMS target detector. For the target distance up to 3 m with a field of view about 20º × 20º, the measurement resolution is about 10.2 cm in range, 0.15º in the horizontal direction and 0.22º in the vertical direction for orientation.

  1. MEMS for Tunable Photonic Metamaterial Applications

    Science.gov (United States)

    Stark, Thomas

    Photonic metamaterials are materials whose optical properties are derived from artificially-structured sub-wavelength unit cells, rather than from the bulk properties of the constituent materials. Examples of metamaterials include plasmonic materials, negative index materials, and electromagnetic cloaks. While advances in simulation tools and nanofabrication methods have allowed this field to grow over the past several decades, many challenges still exist. This thesis addresses two of these challenges: fabrication of photonic metamaterials with tunable responses and high-throughput nanofabrication methods for these materials. The design, fabrication, and optical characterization of a microelectromechanical systems (MEMS) tunable plasmonic spectrometer are presented. An array of holes in a gold film, with plasmon resonance in the mid-infrared, is suspended above a gold reflector, forming a Fabry-Perot interferometer of tunable length. The spectra exhibit the convolution of extraordinary optical transmission through the holes and Fabry-Perot resonances. Using MEMS, the interferometer length is modulated from 1.7 mum to 21.67 mum , thereby tuning the free spectral range from about 2900 wavenumbers to 230.7 wavenumbers and shifting the reflection minima and maxima across the infrared. Due to its broad spectral tunability in the fingerprint region of the mid-infrared, this device shows promise as a tunable biological sensing device. To address the issue of high-throughput, high-resolution fabrication of optical metamaterials, atomic calligraphy, a MEMS-based dynamic stencil lithography technique for resist-free fabrication of photonic metamaterials on unconventional substrates, has been developed. The MEMS consists of a moveable stencil, which can be actuated with nanometer precision using electrostatic comb drive actuators. A fabrication method and flip chip method have been developed, enabling evaporation of metals through the device handle for fabrication on an

  2. Modeling and experimental verification of thermally induced residual stress in RF-MEMS

    International Nuclear Information System (INIS)

    Somà, Aurelio; Saleem, Muhammad Mubasher

    2015-01-01

    Electrostatically actuated radio frequency microelectromechanical systems (RF-MEMS) generally consist of microcantilevers and clamped–clamped microbeams. The presence of residual stress in these microstructures affects the static and dynamic behavior of the device. In this study, nonlinear finite element method (FEM) modeling and the experimental validation of residual stress induced in the clamped–clamped microbeams and the symmetric toggle RF-MEMS switch (STS) is presented. The formation of residual stress due to plastic deformation during the thermal loading-unloading cycle in the plasma etching step of the microfabrication process is explained and modeled using the Bauschinger effect. The difference between the designed and the measured natural frequency and pull-in voltage values for the clamped–clamped microbeams is explained by the presence of the nonhomogenous tensile residual stress. For the STS switch specimens, three-dimensional (3D) FEM models are developed and the initial deflection at zero bias voltage, observed during the optical profile measurements, is explained by the residual stress developed during the plasma etching step. The simulated residual stress due to the plastic deformation is included in the STS models to obtain the switch pull-in voltage. At the end of the simulation process, a good correspondence is obtained between the FEM model results and the experimental measurements for both the clamped–clamped microbeams and the STS switch specimens. (paper)

  3. More questions for mirror neurons.

    Science.gov (United States)

    Borg, Emma

    2013-09-01

    The mirror neuron system is widely held to provide direct access to the motor goals of others. This paper critically investigates this idea, focusing on the so-called 'intentional worry'. I explore two answers to the intentional worry: first that the worry is premised on too limited an understanding of mirror neuron behaviour (Sections 2 and 3), second that the appeal made to mirror neurons can be refined in such a way as to avoid the worry (Section 4). I argue that the first response requires an account of the mechanism by which small-scale gestures are supposedly mapped to larger chains of actions but that none of the extant accounts of this mechanism are plausible. Section 4 then briefly examines refinements of the mirror neuron-mindreading hypothesis which avoid the intentional worry. I conclude that these refinements may well be plausible but that they undermine many of the claims standardly made for mirror neurons. Copyright © 2012 Elsevier Inc. All rights reserved.

  4. Gasdynamic Multiple-Mirror Trap

    Science.gov (United States)

    Beklemishev, Alexei; Anikeev, Andrei; Bagryansky, Peter; Burdakov, Alexander; Gavrilenko, Dmitrii; Ivanov, Alexander; Polosatkin, Sergei; Sinitsky, Stanislav

    2013-10-01

    The new linear device for confinement of fusion plasmas, GDMT, is being developed at the Budker Institute of Nuclear Physics, Novosibirsk. The facility will combine features of existing GOL-3 and GDT devices: the central GDT-like cell with sloshing NBI ions, and the multiple-mirror plugs for suppression of axial losses. Such combination became feasible due to recent discoveries. In particular, the requirement of flute-mode stability can be relaxed by using vortex confinement, achieved by plasma biasing through open field lines. This allows the use of potentially destabilizing multiple-mirror sections. Another key effect is the enhanced multiple-mirror confinement at low densities, which is due to collective rather than coulomb scattering of ions. Hence the multiple-mirror plugs can work at pressures compatible with magnetic confinement. These two main technologies are supplemented by axial injection of pulsed electron beams. Besides additional plasma heating (like in GOL-3), such injection can be used for induced collective scattering in the multiple-mirror plugs and for plasma biasing. The new device is designed to be superconducting and modular. It will be built in stages, with the first stage, GDMT-T, intended for PMI studies. The work was financially supported by Ministry of Education and Science RF.

  5. Metamaterial mirrors in optoelectronic devices

    KAUST Repository

    Esfandyarpour, Majid

    2014-06-22

    The phase reversal that occurs when light is reflected from a metallic mirror produces a standing wave with reduced intensity near the reflective surface. This effect is highly undesirable in optoelectronic devices that use metal films as both electrical contacts and optical mirrors, because it dictates a minimum spacing between the metal and the underlying active semiconductor layers, therefore posing a fundamental limit to the overall thickness of the device. Here, we show that this challenge can be circumvented by using a metamaterial mirror whose reflection phase is tunable from that of a perfect electric mirror († = €) to that of a perfect magnetic mirror († = 0). This tunability in reflection phase can also be exploited to optimize the standing wave profile in planar devices to maximize light-matter interaction. Specifically, we show that light absorption and photocurrent generation in a sub-100 nm active semiconductor layer of a model solar cell can be enhanced by ∼20% over a broad spectral band. © 2014 Macmillan Publishers Limited.

  6. Vertex algebras and mirror symmetry

    International Nuclear Information System (INIS)

    Borisov, L.A.

    2001-01-01

    Mirror Symmetry for Calabi-Yau hypersurfaces in toric varieties is by now well established. However, previous approaches to it did not uncover the underlying reason for mirror varieties to be mirror. We are able to calculate explicitly vertex algebras that correspond to holomorphic parts of A and B models of Calabi-Yau hypersurfaces and complete intersections in toric varieties. We establish the relation between these vertex algebras for mirror Calabi-Yau manifolds. This should eventually allow us to rewrite the whole story of toric mirror symmetry in the language of sheaves of vertex algebras. Our approach is purely algebraic and involves simple techniques from toric geometry and homological algebra, as well as some basic results of the theory of vertex algebras. Ideas of this paper may also be useful in other problems related to maps from curves to algebraic varieties.This paper could also be of interest to physicists, because it contains explicit description of holomorphic parts of A and B models of Calabi-Yau hypersurfaces and complete intersections in terms of free bosons and fermions. (orig.)

  7. An inverse-polished mirror for wavefront correction of space-based telescopes

    Science.gov (United States)

    Enya, K.; Haze, K.; Chibu, Y.; Kotani, T.; Kaneda, H.; Oyabu, S.; Ishihara, D.; Oseki, S.; Abe, L.; Kobayashi, H.

    2014-07-01

    In this report we describe our development of a prototype inverse-polished mirror for the passive correction of the static and predictable wavefront errors (WFE) of space-based telescopes, in particular, especially for infrared coronagraphs. An artificial WFE pattern with a root mean square (rms) value of 350 nm was numerically generated to facilitate the design of the prototype mirror. The surface of the mirror is approximately flat, is 50.0 mm in diameter and 15.0 mm thick at the edge. The designed WFE pattern was constructed on the mirror surface by micro-polishing. Both the figure and roughness of the mirror surface were evaluated. The rms value of the measured surface figure was reduced to 135 nm after subtraction of the designed surface figure. The benefit of subtraction to mid-infrared coronagraph performance was simulated, which showed the contrast was improved by a factor of ~100 close to the core (closer than 10 λ/D where λ and D are the wavelength and telescope aperture diameter, respectively) of the coronagraphic image of a point source. An analysis of the power spectrum density shows that the lower frequencies in the WFE are well reproduced on the mirror, while the higher frequencies remain due to the limitations imposed on the controllable spatial resolution by the fabrication process. In this study, inverse-polished mirrors combined with deformable mirrors and their application to ground-based telescopes are also discussed. To fully explore the potential of the inverse-polished mirror, a systematic allocation of the error budget is essential taking into account not only the fabrication accuracy of the mirror but also an evaluation of the telescope and other factors with non-predictable uncertainties.

  8. Compact neutron imaging system using axisymmetric mirrors

    Science.gov (United States)

    Khaykovich, Boris; Moncton, David E; Gubarev, Mikhail V; Ramsey, Brian D; Engelhaupt, Darell E

    2014-05-27

    A dispersed release of neutrons is generated from a source. A portion of this dispersed neutron release is reflected by surfaces of a plurality of nested, axisymmetric mirrors in at least an inner mirror layer and an outer mirror layer, wherein the neutrons reflected by the inner mirror layer are incident on at least one mirror surface of the inner mirror layer N times, wherein N is an integer, and wherein neutrons reflected by the outer mirror are incident on a plurality of mirror surfaces of the outer layer N+i times, where i is a positive integer, to redirect the neutrons toward a target. The mirrors can be formed by a periodically reversed pulsed-plating process.

  9. Eye-safe diode laser Doppler lidar with a MEMS beam-scanner

    DEFF Research Database (Denmark)

    Hu, Qi; Pedersen, Christian; Rodrigo, Peter John

    2016-01-01

    at the probing distance (R = 60 m) of each lineof-sight – relevant for meeting eye-safety requirements. The switching time of the MEMS-SM is measured to be in the order of a few milliseconds. Time-shared (0.25 s per line-of-sight) radial wind speed measurements at 50 Hz data rate are experimentally demonstrated......We present a novel Doppler lidar that employs a cw diode laser operating at 1.5 μm and a micro-electro-mechanical-system scanning mirror (MEMS-SM). In this work, two functionalities of the lidar system are demonstrated. Firstly, we describe the capability to effectively steer the lidar probe beam...... to multiple optical transceivers along separate lines-ofsight. The beam steering functionality is demonstrated using four lines-ofsight – each at an angle of 18° with respect to their symmetry axis. Secondly, we demonstrate the ability to spatially dither the beam focus to reduce the mean irradiance...

  10. High-uniformity centimeter-wide Si etching method for MEMS devices with large opening elements

    Science.gov (United States)

    Okamoto, Yuki; Tohyama, Yukiya; Inagaki, Shunsuke; Takiguchi, Mikio; Ono, Tomoki; Lebrasseur, Eric; Mita, Yoshio

    2018-04-01

    We propose a compensated mesh pattern filling method to achieve highly uniform wafer depth etching (over hundreds of microns) with a large-area opening (over centimeter). The mesh opening diameter is gradually changed between the center and the edge of a large etching area. Using such a design, the etching depth distribution depending on sidewall distance (known as the local loading effect) inversely compensates for the over-centimeter-scale etching depth distribution, known as the global or within-die(chip)-scale loading effect. Only a single DRIE with test structure patterns provides a micro-electromechanical systems (MEMS) designer with the etched depth dependence on the mesh opening size as well as on the distance from the chip edge, and the designer only has to set the opening size so as to obtain a uniform etching depth over the entire chip. This method is useful when process optimization cannot be performed, such as in the cases of using standard conditions for a foundry service and of short turn-around-time prototyping. To demonstrate, a large MEMS mirror that needed over 1 cm2 of backside etching was successfully fabricated using as-is-provided DRIE conditions.

  11. Integration and demonstration of MEMS-scanned LADAR for robotic navigation

    Science.gov (United States)

    Stann, Barry L.; Dammann, John F.; Del Giorno, Mark; DiBerardino, Charles; Giza, Mark M.; Powers, Michael A.; Uzunovic, Nenad

    2014-06-01

    LADAR is among the pre-eminent sensor modalities for autonomous vehicle navigation. Size, weight, power and cost constraints impose significant practical limitations on perception systems intended for small ground robots. In recent years, the Army Research Laboratory (ARL) developed a LADAR architecture based on a MEMS mirror scanner that fundamentally improves the trade-offs between these limitations and sensor capability. We describe how the characteristics of a highly developed prototype correspond to and satisfy the requirements of autonomous navigation and the experimental scenarios of the ARL Robotics Collaborative Technology Alliance (RCTA) program. In particular, the long maximum and short minimum range capability of the ARL MEMS LADAR makes it remarkably suitable for a wide variety of scenarios from building mapping to the manipulation of objects at close range, including dexterous manipulation with robotic arms. A prototype system was applied to a small (approximately 50 kg) unmanned robotic vehicle as the primary mobility perception sensor. We present the results of a field test where the perception information supplied by the LADAR system successfully accomplished the experimental objectives of an Integrated Research Assessment (IRA).

  12. MEMS wireless temperature sensor for combustion studies

    Science.gov (United States)

    Lee, Minhyeok; Kawahara, Yoshihiro; Morimoto, Kenichi; Suzuki, Yuji

    2014-11-01

    A MEMS wireless wall temperature sensor for combustion studies is proposed. Electrical resistance change in a LCR circuit is used to measure the temperature through inductive coupling the sensor coil and the read-out coil. Equivalent circuit model and 3-D electromagnetic simulation are employed to design sensor configuration. The resonant frequency is increased with increasing the resistance due to the temperature increase. The prototype sensor was successfully fabricated with MEMS technologies. The impedance phase angle shows a sharp dip at the resonant frequency, which is in good accordance with the equivalent circuit model. The measured temperature sensitivity is found to be as high as 6 kHz/K, when the distance between the read-out and the sensor coils is 0.71 mm.

  13. MEMS Packaging - Current Issues and Approaches

    Energy Technology Data Exchange (ETDEWEB)

    DRESSENDORFER,PAUL V.; PETERSON,DAVID W.; REBER,CATHLEEN ANN

    2000-01-19

    The assembly and packaging of MEMS (Microelectromechanical Systems) devices raise a number of issues over and above those normally associated with the assembly of standard microelectronic circuits. MEMS components include a variety of sensors, microengines, optical components, and other devices. They often have exposed mechanical structures which during assembly require particulate control, space in the package, non-contact handling procedures, low-stress die attach, precision die placement, unique process schedules, hermetic sealing in controlled environments (including vacuum), and other special constraints. These constraints force changes in the techniques used to separate die on a wafer, in the types of packages which can be used in the assembly processes and materials, and in the sealing environment and process. This paper discusses a number of these issues and provides information on approaches being taken or proposed to address them.

  14. SOI silicon on glass for optical MEMS

    DEFF Research Database (Denmark)

    Larsen, Kristian Pontoppidan; Ravnkilde, Jan Tue; Hansen, Ole

    2003-01-01

    A newly developed fabrication method for fabrication of single crystalline Si (SCS) components on glass, utilizing Deep Reactive Ion Etching (DRIE) of a Silicon On Insulator (SOI) wafer is presented. The devices are packaged at wafer level in a glass-silicon-glass (GSG) stack by anodic bonding...... and a final sealing at the interconnects can be performed using a suitable polymer. Packaged MEMS on glass are advantageous within Optical MEMS and for sensitive capacitive devices. We report on experiences with bonding SOI to Pyrex. Uniform DRIE shallow and deep etching was achieved by a combination...... of an optimized device layout and an optimized process recipe. The behavior of the buried oxide membrane when used as an etch stop for the through-hole etch is described. No harmful buckling or fracture of the membrane is observed for an oxide thickness below 1 μm, but larger and more fragile released structures...

  15. Giant Piezoelectricity on Si for Hyperactive MEMS

    Science.gov (United States)

    Baek, S. H.; Park, J.; Kim, D. M.; Aksyuk, V. A.; Das, R. R.; Bu, S. D.; Felker, D. A.; Lettieri, J.; Vaithyanathan, V.; Bharadwaja, S. S. N.; Bassiri-Gharb, N.; Chen, Y. B.; Sun, H. P.; Folkman, C. M.; Jang, H. W.; Kreft, D. J.; Streiffer, S. K.; Ramesh, R.; Pan, X. Q.; Trolier-McKinstry, S.; Schlom, D. G.; Rzchowski, M. S.; Blick, R. H.; Eom, C. B.

    2011-11-01

    Microelectromechanical systems (MEMS) incorporating active piezoelectric layers offer integrated actuation, sensing, and transduction. The broad implementation of such active MEMS has long been constrained by the inability to integrate materials with giant piezoelectric response, such as Pb(Mg1/3Nb2/3)O3-PbTiO3 (PMN-PT). We synthesized high-quality PMN-PT epitaxial thin films on vicinal (001) Si wafers with the use of an epitaxial (001) SrTiO3 template layer with superior piezoelectric coefficients (e31,f = -27 ± 3 coulombs per square meter) and figures of merit for piezoelectric energy-harvesting systems. We have incorporated these heterostructures into microcantilevers that are actuated with extremely low drive voltage due to thin-film piezoelectric properties that rival bulk PMN-PT single crystals. These epitaxial heterostructures exhibit very large electromechanical coupling for ultrasound medical imaging, microfluidic control, mechanical sensing, and energy harvesting.

  16. Image Registration for Stability Testing of MEMS

    Science.gov (United States)

    Memarsadeghi, Nargess; LeMoigne, Jacqueline; Blake, Peter N.; Morey, Peter A.; Landsman, Wayne B.; Chambers, Victor J.; Moseley, Samuel H.

    2011-01-01

    Image registration, or alignment of two or more images covering the same scenes or objects, is of great interest in many disciplines such as remote sensing, medical imaging. astronomy, and computer vision. In this paper, we introduce a new application of image registration algorithms. We demonstrate how through a wavelet based image registration algorithm, engineers can evaluate stability of Micro-Electro-Mechanical Systems (MEMS). In particular, we applied image registration algorithms to assess alignment stability of the MicroShutters Subsystem (MSS) of the Near Infrared Spectrograph (NIRSpec) instrument of the James Webb Space Telescope (JWST). This work introduces a new methodology for evaluating stability of MEMS devices to engineers as well as a new application of image registration algorithms to computer scientists.

  17. MEMS Gyroscopes Based on Acoustic Sagnac Effect

    Directory of Open Access Journals (Sweden)

    Yuanyuan Yu

    2016-12-01

    Full Text Available This paper reports on the design, fabrication and preliminary test results of a novel microelectromechanical systems (MEMS device—the acoustic gyroscope. The unique operating mechanism is based on the “acoustic version” of the Sagnac effect in fiber-optic gyros. The device measures the phase difference between two sound waves traveling in opposite directions, and correlates the signal to the angular velocity of the hosting frame. As sound travels significantly slower than light and develops a larger phase change within the same path length, the acoustic gyro can potentially outperform fiber-optic gyros in sensitivity and form factor. It also promises superior stability compared to vibratory MEMS gyros as the design contains no moving parts and is largely insensitive to mechanical stress or temperature. We have carried out systematic simulations and experiments, and developed a series of processes and design rules to implement the device.

  18. Giant piezoelectricity on Si for hyperactive MEMS.

    Science.gov (United States)

    Baek, S H; Park, J; Kim, D M; Aksyuk, V A; Das, R R; Bu, S D; Felker, D A; Lettieri, J; Vaithyanathan, V; Bharadwaja, S S N; Bassiri-Gharb, N; Chen, Y B; Sun, H P; Folkman, C M; Jang, H W; Kreft, D J; Streiffer, S K; Ramesh, R; Pan, X Q; Trolier-McKinstry, S; Schlom, D G; Rzchowski, M S; Blick, R H; Eom, C B

    2011-11-18

    Microelectromechanical systems (MEMS) incorporating active piezoelectric layers offer integrated actuation, sensing, and transduction. The broad implementation of such active MEMS has long been constrained by the inability to integrate materials with giant piezoelectric response, such as Pb(Mg(1/3)Nb(2/3))O(3)-PbTiO(3) (PMN-PT). We synthesized high-quality PMN-PT epitaxial thin films on vicinal (001) Si wafers with the use of an epitaxial (001) SrTiO(3) template layer with superior piezoelectric coefficients (e(31,f) = -27 ± 3 coulombs per square meter) and figures of merit for piezoelectric energy-harvesting systems. We have incorporated these heterostructures into microcantilevers that are actuated with extremely low drive voltage due to thin-film piezoelectric properties that rival bulk PMN-PT single crystals. These epitaxial heterostructures exhibit very large electromechanical coupling for ultrasound medical imaging, microfluidic control, mechanical sensing, and energy harvesting.

  19. Cell Culture on MEMS Platforms: A Review

    Science.gov (United States)

    Ni, Ming; Tong, Wen Hao; Choudhury, Deepak; Rahim, Nur Aida Abdul; Iliescu, Ciprian; Yu, Hanry

    2009-01-01

    Microfabricated systems provide an excellent platform for the culture of cells, and are an extremely useful tool for the investigation of cellular responses to various stimuli. Advantages offered over traditional methods include cost-effectiveness, controllability, low volume, high resolution, and sensitivity. Both biocompatible and bio-incompatible materials have been developed for use in these applications. Biocompatible materials such as PMMA or PLGA can be used directly for cell culture. However, for bio-incompatible materials such as silicon or PDMS, additional steps need to be taken to render these materials more suitable for cell adhesion and maintenance. This review describes multiple surface modification strategies to improve the biocompatibility of MEMS materials. Basic concepts of cell-biomaterial interactions, such as protein adsorption and cell adhesion are covered. Finally, the applications of these MEMS materials in Tissue Engineering are presented. PMID:20054478

  20. Active mems microbeam device for gas detection

    KAUST Repository

    Bouchaala, Adam M.

    2017-10-05

    Sensors and active switches for applications in gas detection and other fields are described. The devices are based on the softening and hardening nonlinear response behaviors of microelectromechanical systems (MEMS) clamped-clamped microbeams. In that context, embodiments of gas-triggered MEMS microbeam sensors and switches are described. The microbeam devices can be coated with a Metal-Organic Framework to achieve high sensitivity. For gas sensing, an amplitude-based tracking algorithm can be used to quantify an amount of gas captured by the devices according to frequency shift. Noise analysis is also conducted according to the embodiments, which shows that the microbeam devices have high stability against thermal noise. The microbeam devices are also suitable for the generation of binary sensing information for alarming, for example.

  1. Investigating ESD sensitivity in electrostatic SiGe MEMS

    International Nuclear Information System (INIS)

    Sangameswaran, Sandeep; De Coster, Jeroen; Linten, Dimitri; Scholz, Mirko; Thijs, Steven; Groeseneken, Guido; De Wolf, Ingrid

    2010-01-01

    The sensitivity of electrostatically actuated SiGe microelectromechanical systems to electrostatic discharge events has been investigated in this paper. Torsional micromirrors and RF microelectromechanical systems (MEMS) actuators have been used as two case studies to perform this study. On-wafer electrostatic discharge (ESD) measurement methods, such as the human body model (HBM) and machine model (MM), are discussed. The impact of HBM ESD zap tests on the functionality and behavior of MEMS is explained and the ESD failure levels of MEMS have been verified by failure analysis. It is demonstrated that electrostatic MEMS devices have a high sensitivity to ESD and that it is essential to protect them.

  2. Review on the Modeling of Electrostatic MEMS

    Directory of Open Access Journals (Sweden)

    Wan-Chun Chuang

    2010-06-01

    Full Text Available Electrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduces the physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices.

  3. Different grades MEMS accelerometers error characteristics

    Science.gov (United States)

    Pachwicewicz, M.; Weremczuk, J.

    2017-08-01

    The paper presents calibration effects of two different MEMS accelerometers of different price and quality grades and discusses different accelerometers errors types. The calibration for error determining is provided by reference centrifugal measurements. The design and measurement errors of the centrifuge are discussed as well. It is shown that error characteristics of the sensors are very different and it is not possible to use simple calibration methods presented in the literature in both cases.

  4. Ultra-compact MEMS FTIR spectrometer

    Science.gov (United States)

    Sabry, Yasser M.; Hassan, Khaled; Anwar, Momen; Alharon, Mohamed H.; Medhat, Mostafa; Adib, George A.; Dumont, Rich; Saadany, Bassam; Khalil, Diaa

    2017-05-01

    Portable and handheld spectrometers are being developed and commercialized in the late few years leveraging the rapidly-progressing technology and triggering new markets in the field of on-site spectroscopic analysis. Although handheld devices were commercialized for the near-infrared spectroscopy (NIRS), their size and cost stand as an obstacle against the deployment of the spectrometer as spectral sensing components needed for the smart phone industry and the IoT applications. In this work we report a chip-sized microelectromechanical system (MEMS)-based FTIR spectrometer. The core optical engine of the solution is built using a passive-alignment integration technique for a selfaligned MEMS chip; self-aligned microoptics and a single detector in a tiny package sized about 1 cm3. The MEMS chip is a monolithic, high-throughput scanning Michelson interferometer fabricated using deep reactive ion etching technology of silicon-on-insulator substrate. The micro-optical part is used for conditioning the input/output light to/from the MEMS and for further light direction to the detector. Thanks to the all-reflective design of the conditioning microoptics, the performance is free of chromatic aberration. Complemented by the excellent transmission properties of the silicon in the infrared region, the integrated solution allows very wide spectral range of operation. The reported sensor's spectral resolution is about 33 cm-1 and working in the range of 1270 nm to 2700 nm; upper limited by the extended InGaAs detector. The presented solution provides a low cost, low power, tiny size, wide wavelength range NIR spectral sensor that can be manufactured with extremely high volumes. All these features promise the compatibility of this technology with the forthcoming demand of smart portable and IoT devices.

  5. Thermoelectrical Generator for a MEMS-Fuze

    OpenAIRE

    A. K. Efremov; K. V. Vlasov

    2015-01-01

    The structure of modern fuzes includes micro-electromechanical systems (MEMS), which have such advanced devices as micro-accelerometers and micro-switches, being triggered at a specified level of setback. Independent power source (PS), as an inherent part of the MEMSfuze, charges an energy storage unit during the shot and triggers the fuze firing circuit when the shell encounters the target. Operating level of the control signal should be achieved within the time of remote arming, determined ...

  6. Movable MEMS Devices on Flexible Silicon

    KAUST Repository

    Ahmed, Sally

    2013-05-05

    Flexible electronics have gained great attention recently. Applications such as flexible displays, artificial skin and health monitoring devices are a few examples of this technology. Looking closely at the components of these devices, although MEMS actuators and sensors can play critical role to extend the application areas of flexible electronics, fabricating movable MEMS devices on flexible substrates is highly challenging. Therefore, this thesis reports a process for fabricating free standing and movable MEMS devices on flexible silicon substrates; MEMS flexure thermal actuators have been fabricated to illustrate the viability of the process. Flexure thermal actuators consist of two arms: a thin hot arm and a wide cold arm separated by a small air gap; the arms are anchored to the substrate from one end and connected to each other from the other end. The actuator design has been modified by adding etch holes in the anchors to suit the process of releasing a thin layer of silicon from the bulk silicon substrate. Selecting materials that are compatible with the release process was challenging. Moreover, difficulties were faced in the fabrication process development; for example, the structural layer of the devices was partially etched during silicon release although it was protected by aluminum oxide which is not attacked by the releasing gas . Furthermore, the thin arm of the thermal actuator was thinned during the fabrication process but optimizing the patterning and etching steps of the structural layer successfully solved this problem. Simulation was carried out to compare the performance of the original and the modified designs for the thermal actuators and to study stress and temperature distribution across a device. A fabricated thermal actuator with a 250 μm long hot arm and a 225 μm long cold arm separated by a 3 μm gap produced a deflection of 3 μm before silicon release, however, the fabrication process must be optimized to obtain fully functioning

  7. Fractal Structures For Fixed Mems Capacitors

    KAUST Repository

    Elshurafa, Amro M.

    2014-08-28

    An embodiment of a fractal fixed capacitor comprises a capacitor body in a microelectromechanical system (MEMS) structure. The capacitor body has a first plate with a fractal shape separated by a horizontal distance from a second plate with a fractal shape. The first plate and the second plate are within the same plane. Such a fractal fixed capacitor further comprises a substrate above which the capacitor body is positioned.

  8. On the Stiction of MEMS Materials

    DEFF Research Database (Denmark)

    Zhuang, Yanxin; Menon, Aric Kumaran

    2005-01-01

    energies and stiction of commonly used MEMS materials by contact angle measurements and atomic force microscopy (AFM). Dispersive and polar components of surface energies are calculated by Owens-Wendt-Rabel-Kaelble method. Silicon and silicon-related materials have higher polar surface energies than SU-8...... been shown that the materials with higher surface energy have higher sticton/adhesion forces. The topography of surface influences the contact angle and stiction, and is also discussed in the paper....

  9. The alignment and isostatic mount bonding technique of the aerospace Cassegrain telescope primary mirror

    Science.gov (United States)

    Lin, Wei Cheng; Chang, Shenq-Tsong; Lin, Yu-Chuan; Hsu, Ming-Ying; Chang, Yu-Ting; Chang, Sheng-Hsiung; Huang, Ting-Ming

    2012-10-01

    In order to meet both optical performance and structural stiffness requirements of the aerospace Cassegrain telescope, iso-static mount is used as the interface between the primary mirror and the main plate. This article describes the alignment and iso-static mount bonding technique of the primary mirror by assistance of CMM. The design and assembly of mechanical ground support equipment (MGSE) which reduces the deformation of primary mirror by the gravity effect is also presented. The primary mirror adjusting MGSE consists of X-Y linear translation stages, rotation stage and kinematic constrain platform which provides the function of decenter, orientation, tilt and height adjustment of the posture sequentially. After CMM measurement, the radius of curvature, conic constant, decenter and tilt, etc. will be calculated. According to these results, the posture of the mirror will be adjusted to reduce the tilt by the designed MGSE within 0.02 degrees and the distance deviation from the best fitted profile of mirror to main plate shall be less than 0.01 mm. After that, EC 2216 adhesive is used to bond mirror and iso-static mount. During iso-static mount bonding process, CMM is selected to monitor the relative position deviation of the iso-static mount until the adhesive completely cured. After that, the wave front sensors and strain gauges are used to monitor the strain variation while the iso-static mount mounted in the main plate with the screws by the torque wrench. This step is to prevent deformation of the mirror caused from force of the iso-static mount during the mounting process. In the end, the interferometer is used for the optical performance test with +1G and -1G to check the alignment and bonding technique is well or not.

  10. Generation of atto-second pulses on relativistic mirror plasma

    International Nuclear Information System (INIS)

    Vincenti, H.

    2012-12-01

    When an ultra intense femtosecond laser (I > 10 16 W.cm -2 ) with high contrast is focused on a solid target, the laser field at focus is high enough to completely ionize the target surface during the rising edge of the laser pulse and form a plasma. This plasma is so dense (the electron density is of the order of hundred times the critical density) that it completely reflects the incident laser beam in the specular direction: this is the so-called 'plasma mirror'. When laser intensity becomes very high, the non-linear response of the plasma mirror to the laser field periodically deforms the incident electric field leading to high harmonic generation in the reflected beam. In the temporal domain this harmonic spectrum is associated to a train of atto-second pulses. The goals of my work were to get a better comprehension of the properties of harmonic beams produced on plasma mirrors and design new methods to control theses properties, notably in order to produce isolated atto-second pulses instead of trains. Initially, we imagined and modeled the first realistic technique to generate isolated atto-second on plasma mirrors. This brand new approach is based on a totally new physical effect: 'the atto-second lighthouse effect'. Its principle consists in sending the atto-second pulses of the train in different directions and selects one of these pulses by putting a slit in the far field. Despite its simplicity, this technique is very general and applies to any high harmonic generation mechanism. Moreover, the atto-second lighthouse effect has many other applications (e.g in metrology). In particular, it paves the way to atto-second pump-probe experiments. Then, we studied the spatial properties of these harmonics, whose control and characterization are crucial if one wants to use this source in future application experiments. For instance, we need to control very precisely the harmonic beam divergence in order to achieve the atto-second lighthouse effect and get

  11. Hybrid Electrostatic/Flextensional Mirror for Lightweight, Large-Aperture, and Cryogenic Space Telescopes

    Science.gov (United States)

    Patrick, Brian; Moore, James; Hackenberger, Wesley; Jiang, Xiaoning

    2013-01-01

    A lightweight, cryogenically capable, scalable, deformable mirror has been developed for space telescopes. This innovation makes use of polymer-based membrane mirror technology to enable large-aperture mirrors that can be easily launched and deployed. The key component of this innovation is a lightweight, large-stroke, cryogenic actuator array that combines the high degree of mirror figure control needed with a large actuator influence function. The latter aspect of the innovation allows membrane mirror figure correction with a relatively low actuator density, preserving the lightweight attributes of the system. The principal components of this technology are lightweight, low-profile, high-stroke, cryogenic-capable piezoelectric actuators based on PMN-PT (piezoelectric lead magnesium niobate-lead titanate) single-crystal configured in a flextensional actuator format; high-quality, low-thermal-expansion polymer membrane mirror materials developed by NeXolve; and electrostatic coupling between the membrane mirror and the piezoelectric actuator assembly to minimize problems such as actuator print-through.

  12. Anomalous transport in mirror systems

    International Nuclear Information System (INIS)

    Post, R.F.

    1979-01-01

    As now being explored for fusion applications confinement systems based on the mirror principle embody two kinds of plasma regimes. These two regimes are: (a) high-beta plasmas, stabilized against MHD and other low frequency plasma instabilities by magnetic-well fields, but characterized by non-Maxwellian ion distributions; (b) near-Maxwellian plasmas, confined electrostatically (as in the tandem mirror) or in a field-reversed region within the mirror cell. Common to both situations are the questions of anomalous transport owing to high frequency instabilities in the non-maxwellian portions of the plasmas. This report will summarize the status of theory and of experimental data bearing on these questions, with particular reference to the high temperature regimes of interest for fusion power

  13. Solid polymer MEMS-based fuel cells

    Science.gov (United States)

    Jankowski, Alan F [Livermore, CA; Morse, Jeffrey D [Pleasant Hill, CA

    2008-04-22

    A micro-electro-mechanical systems (MEMS) based thin-film fuel cells for electrical power applications. The MEMS-based fuel cell may be of a solid oxide type (SOFC), a solid polymer type (SPFC), or a proton exchange membrane type (PEMFC), and each fuel cell basically consists of an anode and a cathode separated by an electrolyte layer. The electrolyte layer can consist of either a solid oxide or solid polymer material, or proton exchange membrane electrolyte materials may be used. Additionally catalyst layers can also separate the electrodes (cathode and anode) from the electrolyte. Gas manifolds are utilized to transport the fuel and oxidant to each cell and provide a path for exhaust gases. The electrical current generated from each cell is drawn away with an interconnect and support structure integrated with the gas manifold. The fuel cells utilize integrated resistive heaters for efficient heating of the materials. By combining MEMS technology with thin-film deposition technology, thin-film fuel cells having microflow channels and full-integrated circuitry can be produced that will lower the operating temperature an will yield an order of magnitude greater power density than the currently known fuel cells.

  14. The challenge of reliability in MEMS commercialization

    Energy Technology Data Exchange (ETDEWEB)

    Miller, W.M.; Tanner, D.M.; Miller, S.L.

    1998-09-01

    MicroElectroMechanical Systems (MEMS) that think, sense, act and communicate will open up a broad new array of cost-effective solutions only if MEMS is demonstrated to be sufficiently reliable. This could prove to be a major challenge if it is not addressed concurrently with technology development. There are three requirements for a valid assessment of reliability: statistical significance, identification of fundamental failure mechanisms and development of techniques for accelerating them, and valid physical models to allow prediction of failures during actual use. While these already exist for the microelectronics portion of such integrated systems, the real challenge lies in the less well-understood micromachine portions and its synergistic effects with microelectronics. This requires the elicitation of a methodology focused on MEMS reliability, which the authors discuss. A new testing and analysis infrastructure must also be developed to meet the needs of this methodology. They describe their implementation of this infrastructure and its success in addressing the three requirements for a valid reliability assessment.

  15. A nuclear micro battery for Mems devices

    International Nuclear Information System (INIS)

    Lal, A.; Bilbao Y Leon, R.M.; Guo, H.; Li, H.; Santanam, S.; Yao, R.; Blanchard, J.; Henderson, D.

    2001-01-01

    Micro-electromechanical Systems (MEMS) have not gained wide use because they lack the on-device power required by many important applications. Several forms of energy could be considered to supply this needed power (solar, fossil fuels, etc), but nuclear sources provide an intriguing option in terms of power density and lifetime. This paper describes several approaches for establishing the viability of nuclear sources for powering realistic MEMS devices. Isotopes currently being used include alpha and low-energy beta emitters. The sources are in both solid and liquid form, and a technique for plating a solid source from a liquid source has been investigated. Several approaches are being explored for the production of MEMS power sources. The first concept is a junction-type battery. The second concept involves a more direct use of the charged particles produced by the decay: the creation of a resonator by inducing movement due to attraction or repulsion resulting from the collection of charged particles. Performance results are provided for each of these concepts. (authors)

  16. MEMS Micro-Valve for Space Applications

    Science.gov (United States)

    Chakraborty, I.; Tang, W. C.; Bame, D. P.; Tang, T. K.

    1998-01-01

    We report on the development of a Micro-ElectroMechanical Systems (MEMS) valve that is designed to meet the rigorous performance requirements for a variety of space applications, such as micropropulsion, in-situ chemical analysis of other planets, or micro-fluidics experiments in micro-gravity. These systems often require very small yet reliable silicon valves with extremely low leak rates and long shelf lives. Also, they must survive the perils of space travel, which include unstoppable radiation, monumental shock and vibration forces, as well as extreme variations in temperature. Currently, no commercial MEMS valve meets these requirements. We at JPL are developing a piezoelectric MEMS valve that attempts to address the unique problem of space. We begin with proven configurations that may seem familiar. However, we have implemented some major design innovations that should produce a superior valve. The JPL micro-valve is expected to have an extremely low leak rate, limited susceptibility to particulates, vibration or radiation, as well as a wide operational temperature range.

  17. Harmonic Distortion in CMOS Current Mirrors

    DEFF Research Database (Denmark)

    Bruun, Erik

    1998-01-01

    One of the origins of harmonic distortion in CMOS current mirrors is the inevitable mismatch between the MOS transistors involved. In this paper we examine both single current mirrors and complementary class AB current mirrors and develop an analytical model for the mismatch induced harmonic...... distortion. This analytical model is verified through simulations and is used for a discussion of the impact of mismatch on harmonic distortion properties of CMOS current mirrors. It is found that distortion levels somewhat below 1% can be attained by carefully matching the mirror transistors but ultra low...... distortion is not achievable with CMOS current mirrors...

  18. Fokker-Planck equation in mirror research

    International Nuclear Information System (INIS)

    Post, R.F.

    1983-01-01

    Open confinement systems based on the magnetic mirror principle depend on the maintenance of particle distributions that may deviate substantially from Maxwellian distributions. Mirror research has therefore from the beginning relied on theoretical predictions of non-equilibrium rate processes obtained from solutions to the Fokker-Planck equation. The F-P equation plays three roles: Design of experiments, creation of classical standards against which to compare experiment, and predictions concerning mirror based fusion power systems. Analytical and computational approaches to solving the F-P equation for mirror systems will be reviewed, together with results and examples that apply to specific mirror systems, such as the tandem mirror

  19. Composite single crystal silicon scan mirror substrates, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — Single crystal silicon is a desirable mirror substrate for scan mirrors in space telescopes. As diameters of mirrors become larger, existing manufacturing...

  20. Mirror Advanced Reactor Study (MARS)

    International Nuclear Information System (INIS)

    Logan, B.G.

    1983-01-01

    Progress in a two year study of a 1200 MWe commercial tandem mirror reactor (MARS - Mirror Advanced Reactor Study) has reached the point where major reactor system technologies are identified. New design features of the magnets, blankets, plug heating systems and direct converter are described. With the innovation of radial drift pumping to maintain low plug density, reactor recirculating power fraction is reduced to 20%. Dominance of radial ion and impurity losses into the halo permits gridless, circular direct converters to be dramatically reduced in size. Comparisons of MARS with the Starfire tokamak design are made

  1. Development of ATHENA mirror modules

    DEFF Research Database (Denmark)

    Collon, Maximilien J.; Vacanti, Giuseppe; Barrière, Nicolas M.

    2017-01-01

    Silicon Pore Optics (SPO), developed at cosine with the European Space Agency (ESA) and several academic and industrial partners, provides lightweight, yet stiff, high-resolution X-ray optics. This technology enables ATHENA to reach an unprecedentedly large effective area in the 0.2-12 keV band...... with an angular resolution better than 5". After developing the technology for 50 m and 20 m focal length, this year has witnessed the first 12 m focal length mirror modules being produced. The technology development is also gaining momentum with three different radii under study: Mirror modules for the inner...

  2. Timecourse of mirror and counter-mirror effects measured with transcranial magnetic stimulation.

    Science.gov (United States)

    Cavallo, Andrea; Heyes, Cecilia; Becchio, Cristina; Bird, Geoffrey; Catmur, Caroline

    2014-08-01

    The human mirror system has been the subject of much research over the past two decades, but little is known about the timecourse of mirror responses. In addition, it is unclear whether mirror and counter-mirror effects follow the same timecourse. We used single-pulse transcranial magnetic stimulation to investigate the timecourse of mirror and counter-mirror responses in the human brain. Experiment 1 demonstrated that mirror responses can be measured from around 200 ms after observed action onset. Experiment 2 demonstrated significant effects of counter-mirror sensorimotor training at all timepoints at which a mirror response was found in Experiment 1 (i.e. from 200 ms onward), indicating that mirror and counter-mirror responses follow the same timecourse. By suggesting similarly direct routes for mirror and counter-mirror responses, these results support the associative account of mirror neuron origins whereby mirror responses arise as a result of correlated sensorimotor experience during development. More generally, they contribute to theorizing regarding mirror neuron function by providing some constraints on how quickly mirror responses can influence social cognition. © The Author (2013). Published by Oxford University Press. For Permissions, please email: journals.permissions@oup.com.

  3. Timecourse of mirror and counter-mirror effects measured with transcranial magnetic stimulation

    Science.gov (United States)

    Cavallo, Andrea; Heyes, Cecilia; Becchio, Cristina; Bird, Geoffrey

    2014-01-01

    The human mirror system has been the subject of much research over the past two decades, but little is known about the timecourse of mirror responses. In addition, it is unclear whether mirror and counter-mirror effects follow the same timecourse. We used single-pulse transcranial magnetic stimulation to investigate the timecourse of mirror and counter-mirror responses in the human brain. Experiment 1 demonstrated that mirror responses can be measured from around 200 ms after observed action onset. Experiment 2 demonstrated significant effects of counter-mirror sensorimotor training at all timepoints at which a mirror response was found in Experiment 1 (i.e. from 200 ms onward), indicating that mirror and counter-mirror responses follow the same timecourse. By suggesting similarly direct routes for mirror and counter-mirror responses, these results support the associative account of mirror neuron origins whereby mirror responses arise as a result of correlated sensorimotor experience during development. More generally, they contribute to theorizing regarding mirror neuron function by providing some constraints on how quickly mirror responses can influence social cognition. PMID:23709352

  4. [The ontogeny of the mirror neuron system].

    Science.gov (United States)

    Myowa-Yamakoshi, Masako

    2014-06-01

    Abstract Humans utilize the mirror neuron system to understand and predict others' actions. However, the ontogeny of the mirror neuron system remains unknown. Whether mirror neuron function is an innate trait or whether mirror neurons acquire their sensorimotor matching properties ontogenetically remains to be clarified. In this paper, I review the ontogenetic theory of the mirror neuron system. I then discuss the functioning of the mirror neuron system in the context of social cognitive abilities, which are unique to humans. Recently, some researchers argue that it is too early to interpret the function of mirror neurons as an understanding of the underlying psychological states of others. They imply that such functioning would require inferential cognitive processes that are known to involve areas outside the mirror neuron system. Filling in this missing link may be the key to elucidating the unique ability of humans to understand others' actions.

  5. Second-quantized mirror symmetry

    CERN Document Server

    Ferrara, Sergio; Strominger, A; Vafa, C

    1995-01-01

    We propose and give strong evidence for a duality relating Type II theories on Calabi-Yau spaces and heterotic strings on K3 \\times T^2, both of which have N=2 spacetime supersymmetry. Entries in the dictionary relating the dual theories are derived from an analysis of the soliton string worldsheet in the context of N=2 orbifolds of dual N=4 compactifications of Type II and heterotic strings. In particular we construct a pairing between Type II string theory on a self-mirror Calabi-Yau space X with h^{11}= h^{21}= 11 and a (4, 0) background of heterotic string theory on K3\\times T^2. Under the duality transformation the usual first-quantized mirror symmetry of X becomes a second-quantized mirror symmetry which determines nonperturbative quantum effects. This enables us to compute the exact quantum moduli space. Mirror symmetry of X implies that the low-energy N=2 gauge theory is finite, even at enhanced symmetry points. This prediction is verified by direct computation on the heterotic side. Other branches of...

  6. MHD stability of tandem mirrors

    International Nuclear Information System (INIS)

    Poulsen, P.; Molvik, A.; Shearer, J.

    1982-01-01

    The TMX-Upgrade experiment was described, and the manner in which various plasma parameters could be affected was discussed. The initial analysis of the MHD stability of the tandem mirror was also discussed, with emphasis on the negative tandem configuration

  7. Plasma impact on diagnostic mirrors in JET

    OpenAIRE

    A. Garcia-Carrasco; P. Petersson; M. Rubel; A. Widdowson; E. Fortuna-Zalesna; S. Jachmich; M. Brix; L. Marot

    2017-01-01

    Metallic mirrors will be essential components of all optical systems for plasma diagnosis in ITER. This contribution provides a comprehensive account on plasma impact on diagnostic mirrors in JET with the ITER-Like Wall. Specimens from the First Mirror Test and the lithium-beam diagnostic have been studied by spectrophotometry, ion beam analysis and electron microscopy. Test mirrors made of molybdenum were retrieved from the main chamber and the divertor after exposure to the 2013–2014 experi...

  8. The shallow shell approach to Pogorelov's problem and the breakdown of 'mirror buckling'.

    Science.gov (United States)

    Gomez, Michael; Moulton, Derek E; Vella, Dominic

    2016-03-01

    We present a detailed asymptotic analysis of the point indentation of an unpressurized, spherical elastic shell. Previous analyses of this classic problem have assumed that for sufficiently large indentation depths, such a shell deforms by 'mirror buckling'-a portion of the shell inverts to become a spherical cap with equal but opposite curvature to the undeformed shell. The energy of deformation is then localized in a ridge in which the deformed and undeformed portions of the shell join together, commonly referred to as Pogorelov's ridge. Rather than using an energy formulation, we revisit this problem from the point of view of the shallow shell equations and perform an asymptotic analysis that exploits the largeness of the indentation depth. This reveals first that the stress profile associated with mirror buckling is singular as the indenter is approached. This consequence of point indentation means that mirror buckling must be modified to incorporate the shell's bending stiffness close to the indenter and gives rise to an intricate asymptotic structure with seven different spatial regions. This is in contrast with the three regions (mirror-buckled, ridge and undeformed) that are usually assumed and yields new insight into the large compressive hoop stress that ultimately causes the secondary buckling of the shell.

  9. RF sputtering: A viable tool for MEMS fabrication

    Indian Academy of Sciences (India)

    In the present work, we report preparation of silicon dioxide, silicon nitride and piezoelec- tric ZnO films by RF sputtering process. The properties of these films relevant for MEMS applications have been evaluated. The application of these films in fabricating basic MEMS structures such as diaphragm, micro-cantilever beams ...

  10. Buffering Implications for the Design Space of Streaming MEMS Storage

    NARCIS (Netherlands)

    Khatib, M.G.; Abelmann, Leon; Preas, Kathy

    2011-01-01

    Emerging nanotechnology-based systems encounter new non-functional requirements. This work addresses MEMS storage, an emerging technology that promises ultrahigh density and energy-efficient storage devices. We study the buffering requirement of MEMS storage in streaming applications. We show that

  11. Shutdown Policies for MEMS-Based Storage Devices -- Analytical Models

    NARCIS (Netherlands)

    Khatib, M.G.; Engelen, Johannes Bernardus Charles; Hartel, Pieter H.

    MEMS-based storage devices should be energy ecient for deployment in mobile systems. Since MEMS-based storage devices have a moving me- dia sled, they should be shut down during periods of inactivity. However, shutdown costs energy, limiting the applicability of aggressive shutdown decisions. The

  12. Development and application of high-end aerospace MEMS

    Science.gov (United States)

    Yuan, Weizheng

    2017-12-01

    This paper introduces the design and manufacturing technology of aerospace microelectromechanical systems (MEMS) characterized by high performance, multi-variety, and small batch. Moreover, several kinds of special MEMS devices with high precision, high reliability, and environmental adaptability, as well as their typical applications in the fields of aeronautics and aerospace, are presented.

  13. Lubricated MEMS: effect of boundary slippage and texturing

    NARCIS (Netherlands)

    Tauviqirrahman, Mohammad

    2013-01-01

    Many types of micro-electro-mechanical-system (MEMS) based products are currently employed in a variety of applications. Recently, there has been an increase in the demand for higher reliability of MEMS which incorporate moving parts for each intended application. This is because the reliability of

  14. LTCC phase shifter modules for RF-MEMS-switch integration

    NARCIS (Netherlands)

    Bartnitzek, T.; Muller, E.; Dijk, R. van

    2005-01-01

    The European 1ST project ARHMS is covering a wide field of R&D activities with the final goal: a satellite based car communication system with a fiat electronically steerable roof antenna based on RF-MEMS. The required phase shift for beam steering will be done with MEMS switches and RF networks. An

  15. Nonlinear Adaptive Filter for MEMS Gyro Error Cancellation

    Data.gov (United States)

    National Aeronautics and Space Administration — Thermal biases are the dominate error in low-cost low-power small MEMS gyros. CubeSats often can't afford the power/mass to put a heater on their MEMS gyros and...

  16. Stability, Nonlinearity and Reliability of Electrostatically Actuated MEMS Devices

    Directory of Open Access Journals (Sweden)

    Di Chen

    2007-05-01

    Full Text Available Electrostatic micro-electro-mechanical system (MEMS is a special branch with a wide range of applications in sensing and actuating devices in MEMS. This paper provides a survey and analysis of the electrostatic force of importance in MEMS, its physical model, scaling effect, stability, nonlinearity and reliability in detail. It is necessary to understand the effects of electrostatic forces in MEMS and then many phenomena of practical importance, such as pull-in instability and the effects of effective stiffness, dielectric charging, stress gradient, temperature on the pull-in voltage, nonlinear dynamic effects and reliability due to electrostatic forces occurred in MEMS can be explained scientifically, and consequently the great potential of MEMS technology could be explored effectively and utilized optimally. A simplified parallel-plate capacitor model is proposed to investigate the resonance response, inherent nonlinearity, stiffness softened effect and coupled nonlinear effect of the typical electrostatically actuated MEMS devices. Many failure modes and mechanisms and various methods and techniques, including materials selection, reasonable design and extending the controllable travel range used to analyze and reduce the failures are discussed in the electrostatically actuated MEMS devices. Numerical simulations and discussions indicate that the effects of instability, nonlinear characteristics and reliability subjected to electrostatic forces cannot be ignored and are in need of further investigation.

  17. RF-MEMS capacitive switches with high reliability

    Science.gov (United States)

    Goldsmith, Charles L.; Auciello, Orlando H.; Carlisle, John A.; Sampath, Suresh; Sumant, Anirudha V.; Carpick, Robert W.; Hwang, James; Mancini, Derrick C.; Gudeman, Chris

    2013-09-03

    A reliable long life RF-MEMS capacitive switch is provided with a dielectric layer comprising a "fast discharge diamond dielectric layer" and enabling rapid switch recovery, dielectric layer charging and discharging that is efficient and effective to enable RF-MEMS switch operation to greater than or equal to 100 billion cycles.

  18. Materials, design and processing of air encapsulated MEMS packaging

    Science.gov (United States)

    Fritz, Nathan T.

    integrity. The development of mechanical models complimented the experimental studies. A model of the overcoat materials used the film properties and elastic deformations to study the stress-strain behavior of the suspended dielectric films under external forces. The experimental molding tests and mechanical models were used to establish processing conditions and physical designs for the cavities as a function of cavity size. A novel, metal-free chip package was investigated combining the in-situ thermal decomposition of the sacrificial material during post-mold curing of the lead frame molding compound. Sacrificial materials were characterized for their degree of decomposition during the molding cure to provide a chip package with improved mechanical support and no size restrictions. Improvements to the air cavities for MEMS packaging led to investigations and refinements of other microfabrication processes. The sacrificial polycarbonate materials were shown to be useful as temporary bonding materials for wafer-level bonding. The release temperature and conditions of the processed wafer can be changed based on the polycarbonates formulation. The electroless deposition of metal was investigated as an alternative process for metalizing the air cavities. The deposition of silver and copper using a Sn/Ag catalyst as a replacement for costly palladium activation was demonstrated. The electroless deposition was tested on polymer and silicon dioxide surfaces for organic boards and through-silicon vias.

  19. Reflection of OH molecules from magnetic mirrors

    NARCIS (Netherlands)

    Metsaelae, Markus; Gilijamse, Joop J.; Hoekstra, Steven; van de Meerakker, Sebastiaan Y. T.; Meijer, Gerard

    2008-01-01

    We have reflected a Stark-decelerated beam of OH molecules under normal incidence from mirrors consisting of permanent magnets. Two different types of magnetic mirrors have been demonstrated. A long-range flat mirror made from a large disc magnet has been used to spatially focus the reflected beam

  20. The mirror neuron system : New frontiers

    NARCIS (Netherlands)

    Keysers, Christian; Fadiga, Luciano

    2008-01-01

    Since the discovery of mirror neurons, much effort has been invested into Studying their location and properties in the human brain. Here we review these original findings and introduce the Main topics of this special issue of Social Neuroscience. What does the mirror system code? How is the mirror

  1. 21 CFR 886.1500 - Headband mirror.

    Science.gov (United States)

    2010-04-01

    ... 21 Food and Drugs 8 2010-04-01 2010-04-01 false Headband mirror. 886.1500 Section 886.1500 Food... DEVICES OPHTHALMIC DEVICES Diagnostic Devices § 886.1500 Headband mirror. (a) Identification. A headband mirror is a device intended to be strapped to the head of the user to reflect light for use in...

  2. A generalized construction of mirror manifolds

    International Nuclear Information System (INIS)

    Berglund, P.; Huebsch, T.

    1993-01-01

    We generalize the known method for explicit construction of mirror pairs of (2,2)-superconformal field theories, using the formalism of Landau-Ginzburg orbifolds. Geometrically, these theories are realized as Calabi-Yau hypersurfaces in weighted projective spaces. This generalization makes it possible to construct the mirror partners of many manifolds for which the mirror was not previously known. (orig.)

  3. Prediction of mirror performance from laboratory measurements

    International Nuclear Information System (INIS)

    Church, E.L.; Takacs, P.Z.

    1989-01-01

    This paper describes and illustrates a simple method of predicting the imaging performance of synchrotron mirrors from laboratory measurements of their profiles. It discusses the important role of the transverse coherence length of the incident radiation, the fractal-like form of the mirror roughness, mirror characterization, and the use of closed-form expressions for the predicted image intensities

  4. Real-time analysis for Stochastic errors of MEMS gyro

    Science.gov (United States)

    Miao, Zhiyong; Shi, Hongyang; Zhang, Yi

    2017-10-01

    Since a good knowledge of MEMS gyro stochastic errors is important and critical to MEMS INS/GPS integration system. Therefore, the stochastic errors of MEMS gyro should be accurately modeled and identified. The Allan variance method is IEEE standard method in the filed of analysis stochastic errors of gyro. This kind of method can fully characterize the random character of stochastic errors. However, it requires a large amount of data to be stored, resulting in large offline computational burden. Moreover, it has a painful procedure of drawing slope lines for estimation. To overcome the barriers, a simple linear state-space model was established for MEMS gyro. Then, a recursive EM algorithm was implemented to estimate the stochastic errors of MEMS gyro in real time. The experimental results of ADIS16405 IMU show that the real-time estimations of proposed approach are well within the error limits of Allan variance method. Moreover, the proposed method effectively avoids the storage of data.

  5. Using MEMS Capacitive Switches in Tunable RF Amplifiers

    Directory of Open Access Journals (Sweden)

    Danson John

    2006-01-01

    Full Text Available A MEMS capacitive switch suitable for use in tunable RF amplifiers is described. A MEMS switch is designed, fabricated, and characterized with physical and RF measurements for inclusion in simulations. Using the MEMS switch models, a dual-band low-noise amplifier (LNA operating at GHz and GHz, and a tunable power amplifier (PA at GHz are simulated in m CMOS. MEMS switches allow the LNA to operate with 11 dB of isolation between the two bands while maintaining dB of gain and sub- dB noise figure. MEMS switches are used to implement a variable matching network that allows the PA to realize up to 37% PAE improvement at low input powers.

  6. EUV multilayer mirror, optical system including a multilayer mirror and method of manufacturing a multilayer mirror

    NARCIS (Netherlands)

    Huang, Qiushi; Louis, Eric; Bijkerk, Frederik; de Boer, Meint J.; von Blanckenhagen, G.

    2016-01-01

    A multilayer mirror (M) reflecting extreme ultraviolet (EUV) radiation from a first wave-length range in a EUV spectral region comprises a substrate (SUB) and a stack of layers (SL) on the substrate, the stack of layers comprising layers comprising a low index material and a high index material, the

  7. Predicting multipulse laser-induced failure for molybdenum metal mirrors.

    Science.gov (United States)

    Becker, M F; Ma, C; Walser, R M

    1991-12-20

    In combination with known thermomechanical-fatigue data for Mo, we have conducted transient photothermal deflection (TPD) measurements to develop a model for the multipulse laser damage of Mo mirrors to predict their lifetimes. In laser-damage experiments to verify the model, Mo mirrors were irradiated with 10-ns Nd:YAG laser pulses at 1064 nm at a 10-Hz repetition rate. Digitized TPD waveforms indicated peak surface angular deflection that could then be converted into surface displacement. Numerical modeling of the vertical heat distribution enabled the peak surface-deflection signal to be converted into peak surface temperature. The thermomechanical model was verified by both the experimental and the numerical results. Conventional mechanical-fatigue data for Mo were used to derive a predictive equation for the laser-accumulation lifetime of Mo mirrors. Experiments were performed with 1-10(4) pulses per site, yielding laser-damage thresholds and accumulation curves. The accumulation behavior predicted from measurements of mechanical fatigue was in excellent agreement with the measured behavior. Thus a single-pulse TPD measurement of peak deformation at a subthreshold laser fluence, in conjunction with mechanical-fatigue data, may be used to estimate the safe operating fluence for a component in a multipulse laser environment.

  8. Physics issues in mirror and tandem mirror systems

    Energy Technology Data Exchange (ETDEWEB)

    Post, R.F.

    1984-06-15

    Over the years the study of the confinement of high temperature plasma in magnetic mirror systems has presented researchers with many unusual physics problems. Many of these issues are by now understood theoretically and documented experimentally. With the advent of the tandem mirror idea, some new issues have emerged and are now under intensive study. These include: (1) the generation and control of ambipolar confining potentials and their effect on axial confinement and, (2) the combined influence of nonaxisymmetric magnetic fields (used to ensure MHD stability) and electric magnetic particle drifts on radial transport. Physics considerations associated with these two categories of issues will be reviewed, including concepts for the control of radial transport, under study or proposed.

  9. Failure and fracture of thin film materials for MEMS

    Science.gov (United States)

    Jonnalagadda, Krishna Nagasai

    Design and reliable operation of Microelectromechanical systems (MEMS) depend on the material parameters that influence the failure and fracture properties of brittle and metallic thin films. Failure in brittle materials is quantified by the onset of catastrophic fracture, while in metals, the onset of inelastic deformation is considered as failure as it increases the material compliance. This dissertation research developed new experimental methods to address three aspects on the failure response of these two categories of materials: (a) the role of microstructure and intrinsic stress gradients in the opening mode fracture of mathematically sharp pre-cracks in amorphous and polycrystalline brittle thin films, (b) the critical conditions for mixed mode I/II pre-cracks and their comparison with linear elastic fracture mechanics (LEFM) criteria for crack initiation in homogeneous materials, and (c) the strain rate sensitivity of textured nanocrystalline Au and Pt films with grain sizes of 38 nm and 25 nm respectively. One of the technical objectives of this research was to develop experimental methods and tools that could become standards in MEMS and thin film experimental mechanics. In this regard, a new method was introduced to conduct mode I and mixed mode I/II fracture studies with microscale thin film specimens containing sharp edge pre-cracks. The mode I experiments permitted the direct application of LEFM handbook solutions. On the other hand, the newly introduced mixed mode I/II experiments in thin films were conducted by establishing a new protocol that employs non-standard oblique edge pre-cracks and a numerical analysis based on the J-integral to calculate the stress intensity factors. Similarly, a new experimental protocol has been implemented to carry out experiments with metallic thin films at strain rates that vary by more than six orders of magnitude. The results of mode I fracture experiments concluded that grain inhomogeneity in polycrystalline

  10. The Hodge structure of semiample hypersurfaces and a generalization of the monomial-divisor mirror map

    OpenAIRE

    Mavlyutov, Anvar R.

    2000-01-01

    We solved the long-standing problem of describing the cohomology ring of semiample hypersurfaces in complete simplicial toric varieties. Also, the monomial-divisor mirror map is generalized to a map between the whole Picard group and the space of infinitesimal deformations for a mirror pair of Calabi-Yau hypersurfaces. This map is compatible with certain vanishing limiting products of the subrings of the chiral rings, on which the ring structure is related to a product of the roots of $A$-typ...

  11. A nuclear micro battery for Mems devices

    International Nuclear Information System (INIS)

    Blanchard, J.; Lal, A.; Henderson, D.; Bilbao Y Leon, R.; Guo, H.; Li, H.; Santanam, S.; Yao, R.

    2001-01-01

    Micro-electromechanical Systems (MEMS) have not gained wide use because they lack the on-device power required by many important applications. Several forms of energy could be considered to supply this needed power (solar, fossil fuels, etc), but nuclear sources provide an intriguing option in terms of power density and lifetime. This paper describes several approaches for establishing the viability of nuclear sources for powering realistic MEMS devices. Isotopes currently being used include low-energy beta emitters (solid and liquid) and alpha emitters (solid). Several approaches are being explored for the production of MEMS power sources. The first concept is a junction-type battery. In this case, the charged particles emitted from the decay of the radioisotopes are absorbed by a semiconductor and dissipate most of their energy as ionization of the atoms in the solid. The carriers generated in this fashion are in excess of the number permitted by thermodynamic equilibrium and, if they diffuse to the vicinity of a rectifying junction, induce a voltage across the junction. The second concept involves a more direct use of the charged particles produced by the decay: the creation of a resonator by inducing movement due to attraction or repulsion resulting from the collection of charged particles. As the charge is collected, the deflection of a cantilever beam increases until it contacts a grounded element, thus discharging the beam and causing it to return to its original position. This process will repeat as long as the source is active. One final concept relies on temperature gradients produced by the sources, along with appropriate insulation, to create power using a Peltier device. The source is isolated in order to allow it to reach sufficient temperatures, and the temperature difference between the source and the rest of the device is exploited using the Peltier effect. Performance results will be provided for each of these concepts. (author)

  12. MEMS-Reconfigurable Metamaterials and Antenna Applications

    Directory of Open Access Journals (Sweden)

    Tomislav Debogovic

    2014-01-01

    Full Text Available This paper reviews some of our contributions to reconfigurable metamaterials, where dynamic control is enabled by microelectromechanical systems (MEMS technology. First, we show reconfigurable composite right-/left-handed transmission lines (CRLH-TLs having state of the art phase velocity variation and loss, thereby enabling efficient reconfigurable phase shifters and leaky-wave antennas (LWA. Second, we present very low loss metasurface designs with reconfigurable reflection properties, applicable in reflectarrays and partially reflective surface (PRS antennas. All the presented devices have been fabricated and experimentally validated. They operate in X- and Ku-bands.

  13. Prospects for MEMS in the Automotive Industry

    Directory of Open Access Journals (Sweden)

    Richard DIXON

    2007-12-01

    Full Text Available An automotive sector as a growth market for MEMS sensors is analyzed in the article. The automotive sector accounted for $1.6 billion, making this the second biggest opportunity after IT peripherals and inkjet print heads. By 2011 the market will top $2.2 billion, a CAGR of around 7%. The main applications in revenues terms are, in order, pressure sensors, gyroscopes, accelerometers and flow sensors and this will remain so for the foreseeable future. Automotive companies are forced to innovate as a result of competition and price pressures.

  14. MEMS-BASED 3D CONFOCAL SCANNING MICROENDOSCOPE USING MEMS SCANNERS FOR BOTH LATERAL AND AXIAL SCAN.

    Science.gov (United States)

    Liu, Lin; Wang, Erkang; Zhang, Xiaoyang; Liang, Wenxuan; Li, Xingde; Xie, Huikai

    2014-08-15

    A fiber-optic 3D confocal scanning microendoscope employing MEMS scanners for both lateral and axial scan was designed and constructed. The MEMS 3D scan engine achieved a lateral scan range of over ± 26° with a 2D MEMS scanning micromirror and a depth scan of over 400 μm with a 1D MEMS tunable microlens. The lateral resolution and axial resolution of this system were experimentally measured as 1.0 μm and 7.0 μm, respectively. 2D and 3D confocal reflectance images of micro-patterns, micro-particles, onion skins and acute rat brain tissue were obtained by this MEMS-based 3D confocal scanning microendoscope.

  15. Steps toward increasing Q in mirror systems

    International Nuclear Information System (INIS)

    Post, R.F.

    1979-01-01

    Experiments such as the 2XIIB experiment at Livermore have established the ability of mirror systems to confine high temperature, high density plasmas at central beta values exceeding unity. Given these results the next tasks for the mirror approach are to explore means for increasing the energy gain factor Q and to scale up the plasma volume, both of these requirements deriving from economic constraints. This report discusses means for increasng Q, including recent improvements in the tandem mirror concept and design studies of the field-reversed mirror in the context of upcoming and proposed scaled-up mirror experiments

  16. [What mirror neurons have revealed: revisited].

    Science.gov (United States)

    Murata, Akira; Maeda, Kazutaka

    2014-06-01

    The first paper on mirror neurons was published in 1992. In the span of over two decades since then, much knowledge about the relationship between social cognitive function and the motor control system has been accumulated. Direct matching of visual actions and their corresponding motor representations is the most important functional property of mirror neuron. Many studies have emphasized intrinsic simulation as a core concept for mirror neurons. Mirror neurons are thought to play a role in social cognitive function. However, the function of mirror neurons in the macaque remains unclear, because such cognitive functions are limited or lacking in macaque monkeys. It is therefore important to discuss these neurons in the context of motor function. Rizzolatti and colleagues have stressed that the most important function of mirror neurons in macaques is recognition of actions performed by other individuals. I suggest that mirror neurons in the Macaque inferior pariental lobule might be correlated with body schema. In the parieto-premotor network, matching of corollary discharge and actual sensory feedback is an essential neuronal operation. Recently, neurons showing mirror properties were found in some cortical areas outside the mirror neuron system. The current work would revisit the outcomes of mirror neuron studies to discuss the function of mirror neurons in the monkey.

  17. Development of iridium coated x-ray mirrors for astronomical applications

    Science.gov (United States)

    Döhring, Thorsten; Probst, Anne-Catherine; Emmerich, Florian; Stollenwerk, Manfred; Stehlíková, Veronika; Friedrich, Peter; Damm, Christine

    2017-08-01

    Future space-based X-ray observatories need to be very lightweight for launcher mass constraints. Therefore they will use a reduced mirror thickness, which results in the additional requirement of low coating stress to avoid deformation of the initial precisely shaped mirror substrates. Due to their excellent reflection properties iridium coatings are sometimes applied for grazing incidence mirrors in astronomical X-ray telescopes. At Aschaffenburg University of Applied Sciences the coating of thin iridium films by an RF-magnetron sputtering technique is under development. The work is embedded in collaborations with the Max-Planck-Institute for Extraterrestrial Physics in Germany, the Czech Technical University in Prague, the Osservatorio Astronomico di Brera in Italy, the German Leibniz Institute for Solid State and Materials Research in Dresden, and the French Institute Fresnel. Sputtering with different parameters leads to iridium films with different properties. The current work is focused on the microstructure of the iridium coatings to study the influence of the substrate and of the argon gas pressure on the thin film growing process. Correlations between coating density, surface micro-roughness, the crystalline structure of the iridium layers, and the expected reflectivity of the X-ray mirror as well as coating stress effects are presented and discussed. The final goal of the project is to integrate the produced prototype mirrors into an X-ray telescope module. On a longer timescale measurements of the mirror modules optical performance are planned at the X-ray test facility PANTER.

  18. Mirror neurons: their implications for group psychotherapy.

    Science.gov (United States)

    Schermer, Victor L

    2010-10-01

    Recently discovered mirror neurons in the motor cortex of the brain register the actions and intentions of both the organism and others in the environment. As such, they may play a significant role in social behavior and groups. This paper considers the potential implications of mirror neurons and related neural networks for group therapists, proposing that mirror neurons and mirror systems provide "hard-wired" support for the group therapist's belief in the centrality of relationships in the treatment process and exploring their value in accounting for group-as-a-whole phenomena. Mirror neurons further confirm the holistic, social nature of perception, action, and intention as distinct from a stimulus-response behaviorism. The implications of mirror neurons and mirroring processes for the group therapist role, interventions, and training are also discussed.

  19. Modern magnetic mirrors and their fusion prospects

    International Nuclear Information System (INIS)

    Burdakov, A V; Ivanov, A A; Kruglyakov, E P

    2010-01-01

    This paper reviews the most important findings from recent experiments on modern magnetic mirrors, apart from tandem mirrors and rotating plasma devices. These modern magnetic mirrors are represented by a multiple mirror device GOL-3 and a gas dynamic trap, experiments on which are carried out in Novosibirsk. Both devices are characterized by axial symmetry and improved axial confinement of plasma compared with conventional mirror machines. Recent findings from experiments enable us to more practically consider applications of the gas dynamic trap as a high-flux 14 MeV neutron source for fusion materials testing, and possibly as a driver for fusion-fission hybrids. They also indicate that effective axial plasma confinement in a multiple mirror can be obtained with a smaller plasma density compared with theory and β < 1. This is beneficial from the point of view of the technical realization of a multiple mirror reactor.

  20. Modern magnetic mirrors and their fusion prospects

    Science.gov (United States)

    Burdakov, A. V.; Ivanov, A. A.; Kruglyakov, E. P.

    2010-12-01

    This paper reviews the most important findings from recent experiments on modern magnetic mirrors, apart from tandem mirrors and rotating plasma devices. These modern magnetic mirrors are represented by a multiple mirror device GOL-3 and a gas dynamic trap, experiments on which are carried out in Novosibirsk. Both devices are characterized by axial symmetry and improved axial confinement of plasma compared with conventional mirror machines. Recent findings from experiments enable us to more practically consider applications of the gas dynamic trap as a high-flux 14 MeV neutron source for fusion materials testing, and possibly as a driver for fusion-fission hybrids. They also indicate that effective axial plasma confinement in a multiple mirror can be obtained with a smaller plasma density compared with theory and β < 1. This is beneficial from the point of view of the technical realization of a multiple mirror reactor.