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Sample records for mems capacitive microphones

  1. Development of closed-loop interface circuits for capacitive transducers with application to a MEMS capacitive microphone

    Science.gov (United States)

    Kadirvel, Karthik

    There has been a trend towards miniaturization and batch fabrication of sensors inspired by a similar trend in the electronics industry using novel fabrication techniques used in micro electromechanical system (MEMS) fabrication. Capacitive microphones, whose common applications include aeroacoustic measurement and cell phones, is one such sensor whose dimensions are being aggressively scaled down. In measurement microphones, miniaturization will facilitate improved measurement precision, and in cell phones, miniaturization will reduce printer circuit board space and complexity. Both applications will benefit from the potential cost reduction brought by the batch fabrication of sensors. As sensor geometry is scaled down, improved circuit techniques are required to measure the sensor output. This is because at small geometries sensor capacitance is comparable to unwanted parasitic capacitance which reduces the transducer sensitivity. Also, at reduced sensor geometry, the voltage required to bias the microphone could cause the microphone plates to pull in. The goal of this work is to design and characterize interface circuits that are suitable for miniature capacitive transducers. To achieve this goal, the performance of existing open and closed-loop interface circuits are investigated. Scaling of the performance metrics of the microphone and interface circuit as sensor geometry decreases is also investigated. A proof of concept closed-loop analog controller for a MEMS capacitive microphone is designed. A test apparatus is developed to characterize the system over the audio range by operating the microphone in a helium medium which increases the bandwidth of the test apparatus. Characterization of the microphone in open and closed loop mode of operation is presented. Results show that stable closed loop operation of the microphone is feasible with increased sensitivity and the potential to address pull-in issues.

  2. A Multifunction Low-Power Preamplifier for MEMS Capacitive Microphones

    DEFF Research Database (Denmark)

    Jawed, Syed Arsalan; Nielsen, Jannik Hammel; Gottardi, Massimo

    2009-01-01

    of a source-follower (SF) while the second-stage is a capacitive gain stage. The second-stage employs chopper-stabilization (CHS), while SF buffer shields the MCM sensor from the switching spurs. The PAMP uses M poly bias resistors for the second-stage, exploiting Miller effect to achieve flat audio...

  3. Mechanical performance of SiC based MEMS capacitive microphone for ultrasonic detection in harsh environment

    Science.gov (United States)

    Zawawi, S. A.; Hamzah, A. A.; Mohd-Yasin, F.; Majlis, B. Y.

    2017-08-01

    In this project, SiC based MEMS capacitive microphone was developed for detecting leaked gas in extremely harsh environment such as coal mines and petroleum processing plants via ultrasonic detection. The MEMS capacitive microphone consists of two parallel plates; top plate (movable diaphragm) and bottom (fixed) plate, which separated by an air gap. While, the vent holes were fabricated on the back plate to release trapped air and reduce damping. In order to withstand high temperature and pressure, a 1.0 μm thick SiC diaphragm was utilized as the top membrane. The developed SiC could withstand a temperature up to 1400°C. Moreover, the 3 μm air gap is invented between the top membrane and the bottom plate via wafer bonding. COMSOL Multiphysics simulation software was used for design optimization. Various diaphragms with sizes of 600 μm2, 700 μm2, 800 μm2, 900 μm2 and 1000 μm2 are loaded with external pressure. From this analysis, it was observed that SiC microphone with diaphragm width of 1000 μm2 produced optimal surface vibrations, with first-mode resonant frequency of approximately 36 kHz. The maximum deflection value at resonant frequency is less than the air gap thickness of 8 mu;m, thus eliminating the possibility of shortage between plates during operation. As summary, the designed SiC capacitive microphone has high potential and it is suitable to be applied in ultrasonic gas leaking detection in harsh environment.

  4. Sensitivity enhancement of a folded beam MEMS capacitive accelerometer-based microphone for fully implantable hearing application.

    Science.gov (United States)

    Dwivedi, Apoorva; Khanna, Gargi

    2017-10-31

    The present work attempts to enhance the sensitivity of a folded beam microelectromechanical systems (MEMS) capacitive accelerometer by optimising the device geometry. The accelerometer is intended to serve as a microphone in the fully implantable hearing application which can be surgically implanted in the middle ear bone structure. For the efficient design of the accelerometer as a fully implantable biomedical device, the design parameters such as size, weight and resonant frequency have been considered. The geometrical parameters are varied to obtain the optimum sensitivity considering the design constraints and the stability of the structure. The optimised design is simulated and verified using COMSOL MULTIPHYSICS 4.2. The stability of the device is ensured using eigenfrequency analysis. Optimised results of the device geometry are presented and discussed. The accelerometer has a sensing area of 1 mm2 and attains a nominal capacitance of 5.3 pF and an optimum sensitivity of 6.89 fF.

  5. Pressure reciprocity calibration of a MEMS microphone.

    Science.gov (United States)

    Wagner, Randall P; Fick, Steven E

    2017-09-01

    This article reports the first use of the pressure reciprocity technique to calibrate a micro-electromechanical system (MEMS) microphone. This standardized primary calibration method is conventionally used to calibrate laboratory standard microphones. Results for the pressure reciprocity calibration of a MEMS microphone and two laboratory standard microphones are presented for the frequency range 100-10 000 Hz. Because the amplifier in the MEMS microphone package prevents reciprocal operation, this microphone was used only as a receiver of sound. A description of the procedure is presented along with checks of the measurement results and data regarding the uncertainties of these results.

  6. Modeling high signal-to-noise ratio in a novel silicon MEMS microphone with comb readout

    Science.gov (United States)

    Manz, Johannes; Dehe, Alfons; Schrag, Gabriele

    2017-05-01

    Strong competition within the consumer market urges the companies to constantly improve the quality of their devices. For silicon microphones excellent sound quality is the key feature in this respect which means that improving the signal-to-noise ratio (SNR), being strongly correlated with the sound quality is a major task to fulfill the growing demands of the market. MEMS microphones with conventional capacitive readout suffer from noise caused by viscous damping losses arising from perforations in the backplate [1]. Therefore, we conceived a novel microphone design based on capacitive read-out via comb structures, which is supposed to show a reduction in fluidic damping compared to conventional MEMS microphones. In order to evaluate the potential of the proposed design, we developed a fully energy-coupled, modular system-level model taking into account the mechanical motion, the slide film damping between the comb fingers, the acoustic impact of the package and the capacitive read-out. All submodels are physically based scaling with all relevant design parameters. We carried out noise analyses and due to the modular and physics-based character of the model, were able to discriminate the noise contributions of different parts of the microphone. This enables us to identify design variants of this concept which exhibit a SNR of up to 73 dB (A). This is superior to conventional and at least comparable to high-performance variants of the current state-of-the art MEMS microphones [2].

  7. Novel RF-MEMS capacitive switching structures

    NARCIS (Netherlands)

    Rottenberg, X.; Jansen, Henricus V.; Fiorini, P.; De Raedt, W.; Tilmans, H.A.C.

    2002-01-01

    This paper reports on novel RF-MEMS capacitive switching devices implementing an electrically floating metal layer covering the dielectric to ensure intimate contact with the bridge in the down state. This results in an optimal switch down capacitance and allows optimisation of the down/up

  8. MEMS microphone with a micro Helmholtz resonator

    International Nuclear Information System (INIS)

    Takahashi, Hidetoshi; Matsumoto, Kiyoshi; Shimoyama, Isao; Suzuki, Akira; Iwase, Eiji

    2012-01-01

    This paper reports on the development of a micro electro mechanical system microphone consisting of a piezoresistive cantilever and a micro HR (Helmholtz resonator) for use as an ultrasonic proximity sensor. The resonance frequency of the HR was designed to be equal to that of the cantilever. Therefore, the HR increases the sensitivity of the microphone to ultrasonic waves. The dimensions of the fabricated HR and the cantilever are 1.2 mm × 1.2 mm × 0.6 mm and 130 µm × 40 µm × 0.3 µm, respectively. At a resonance frequency of 22.6 kHz, the cantilever with the HR detected ultrasonic waves with 14 times greater sensitivity than that of the cantilever without the HR. We demonstrated that the fabricated sensor is capable of measuring distances between 0.5 and 6.0 m. (paper)

  9. A method for improving the drop test performance of a MEMS microphone

    Science.gov (United States)

    Winter, Matthias; Ben Aoun, Seifeddine; Feiertag, Gregor; Leidl, Anton; Scheele, Patrick; Seidel, Helmut

    2009-05-01

    Most micro electro mechanical system (MEMS) microphones are designed as capacitive microphones where a thin conductive membrane is located in front of a rigid counter electrode. The membrane is exposed to the environment to convert sound into vibrations of the membrane. The movement of the membrane causes a change in the capacitance between the membrane and the counter electrode. The resonance frequency of the membrane is designed to occur above the acoustic spectrum to achieve a linear frequency response. To obtain a good sensitivity the thickness of the membrane must be as small as possible, typically below 0.5 μm. These fragile membranes may be damaged by rapid pressure changes. For cell phones, drop tests are among the most relevant reliability tests. The extremely high acceleration during the drop impact leads to fast pressure changes in the microphone which could result in a rupture of the membrane. To overcome this problem a stable protection layer can be placed at a small distance to the membrane. The protective layer has small holes to form a low pass filter for air pressure. The low pass filter reduces pressure changes at high frequencies so that damage to the membrane by excitation in resonance will be prevented.

  10. A low-noise/low-power preamplifier for capacitive microphones

    DEFF Research Database (Denmark)

    Fürst, Claus Erdmann

    1996-01-01

    A design for a microphone preamplifier for application in hearing aids is presented. The amplifier operates at a supply of 1-1.5 V, the current drain is 40 μA. The maximum sound level allowed is more than 120 dB SPL (Sound Pressure Level), with a typical noise level of 25 dB(A) SPL (A-weighted). ......A design for a microphone preamplifier for application in hearing aids is presented. The amplifier operates at a supply of 1-1.5 V, the current drain is 40 μA. The maximum sound level allowed is more than 120 dB SPL (Sound Pressure Level), with a typical noise level of 25 dB(A) SPL (A......-weighted). The amplifier is optimized for a capacitive microphone with a capacitance of 1.2 pF. The amplifier is fully integrated in a 0.7 μm n-well CMOS technology. Design details concerning noise performance are analytically described...

  11. A MEMS Condenser Microphone-Based Intracochlear Acoustic Receiver.

    Science.gov (United States)

    Pfiffner, Flurin; Prochazka, Lukas; Peus, Dominik; Dobrev, Ivo; Dalbert, Adrian; Sim, Jae Hoon; Kesterke, Rahel; Walraevens, Joris; Harris, Francesca; Roosli, Christof; Obrist, Dominik; Huber, Alexander

    2017-10-01

    Intracochlear sound pressure (ICSP) measurements are limited by the small dimensions of the human inner ear and the requirements imposed by the liquid medium. A robust intracochlear acoustic receiver (ICAR) for repeated use with a simple data acquisition system that provides the required high sensitivity and small dimensions does not yet exist. The work described in this report aims to fill this gap and presents a new microelectromechanical systems (MEMS) condenser microphone (CMIC)-based ICAR concept suitable for ICSP measurements in human temporal bones. The ICAR head consisted of a passive protective diaphragm (PD) sealing the MEMS CMIC against the liquid medium, enabling insertion into the inner ear. The components of the MEMS CMIC-based ICAR were expressed by a lumped element model (LEM) and compared to the performance of successfully fabricated ICARs. Good agreement was achieved between the LEM and the measurements with different sizes of the PD. The ICSP measurements in a human cadaver temporal bone yielded data in agreement with the literature. Our results confirm that the presented MEMS CMIC-based ICAR is a promising technology for measuring ICSP in human temporal bones in the audible frequency range. A sensor for evaluation of the biomechanical hearing process by quantification of ICSP is presented. The concept has potential as an acoustic receiver in totally implantable cochlear implants.

  12. MEMS Microphone Array Sensor for Air-Coupled Impact-Echo.

    Science.gov (United States)

    Groschup, Robin; Grosse, Christian U

    2015-06-25

    Impact-Echo (IE) is a nondestructive testing technique for plate like concrete structures. We propose a new sensor concept for air-coupled IE measurements. By using an array of MEMS (micro-electro-mechanical system) microphones, instead of a single receiver, several operational advantages compared to conventional sensing strategies in IE are achieved. The MEMS microphone array sensor is cost effective, less sensitive to undesired effects like acoustic noise and has an optimized sensitivity for signals that need to be extracted for IE data interpretation. The proposed sensing strategy is justified with findings from numerical simulations, showing that the IE resonance in plate like structures causes coherent surface displacements on the specimen under test in an area around the impact location. Therefore, by placing several MEMS microphones on a sensor array board, the IE resonance is easier to be identified in the recorded spectra than with single point microphones or contact type transducers. A comparative measurement between the array sensor, a conventional accelerometer and a measurement microphone clearly shows the suitability of MEMS type microphones and the advantages of using these microphones in an array arrangement for IE. The MEMS microphone array will make air-coupled IE measurements faster and more reliable.

  13. RF-MEMS capacitive switches with high reliability

    Science.gov (United States)

    Goldsmith, Charles L.; Auciello, Orlando H.; Carlisle, John A.; Sampath, Suresh; Sumant, Anirudha V.; Carpick, Robert W.; Hwang, James; Mancini, Derrick C.; Gudeman, Chris

    2013-09-03

    A reliable long life RF-MEMS capacitive switch is provided with a dielectric layer comprising a "fast discharge diamond dielectric layer" and enabling rapid switch recovery, dielectric layer charging and discharging that is efficient and effective to enable RF-MEMS switch operation to greater than or equal to 100 billion cycles.

  14. Using MEMS Capacitive Switches in Tunable RF Amplifiers

    Directory of Open Access Journals (Sweden)

    Danson John

    2006-01-01

    Full Text Available A MEMS capacitive switch suitable for use in tunable RF amplifiers is described. A MEMS switch is designed, fabricated, and characterized with physical and RF measurements for inclusion in simulations. Using the MEMS switch models, a dual-band low-noise amplifier (LNA operating at GHz and GHz, and a tunable power amplifier (PA at GHz are simulated in m CMOS. MEMS switches allow the LNA to operate with 11 dB of isolation between the two bands while maintaining dB of gain and sub- dB noise figure. MEMS switches are used to implement a variable matching network that allows the PA to realize up to 37% PAE improvement at low input powers.

  15. Optimization of capacitive microphone and pressure sensor performance by capacitor-electrode shaping

    NARCIS (Netherlands)

    Voorthuyzen, J.A.; Voorthuyzen, J.A.; Sprenkels, A.J.; van der Donk, A.G.H.; van der Donk, A.G.H.; Scheeper, P.R.; Scheeper, P.R.; Bergveld, Piet

    1991-01-01

    In many designs of capacitive microphones or pressure sensors the electrode size is chosen to be equal to the diaphragm size. In this paper it will be discussed whether an electrode size or shape that differs from that of the diaphragm is attractive for obtaining a maximum value for the sensor

  16. Characterization of dielectric charging in RF MEMS capacitive switches

    NARCIS (Netherlands)

    Herfst, R.W.; Huizing, H.G.A.; Steeneken, P.G.; Schmitz, Jurriaan

    2006-01-01

    RF MEMS capacitive switches show great promise for use in wireless communication devices such as mobile phones, but the successful application of these switches is hindered by reliability concerns: charge injection in the dielectric layer (SiN) can cause irreversible stiction of the moving part of

  17. MEMS capacitive force sensors for cellular and flight biomechanics

    International Nuclear Information System (INIS)

    Sun Yu; Nelson, Bradley J

    2007-01-01

    Microelectromechanical systems (MEMS) are playing increasingly important roles in facilitating biological studies. They are capable of providing not only qualitative but also quantitative information on the cellular, sub-cellular and organism levels, which is instrumental to understanding the fundamental elements of biological systems. MEMS force sensors with their high bandwidth and high sensitivity combined with their small size, in particular, have found a role in this domain, because of the importance of quantifying forces and their effect on the function and morphology of many biological structures. This paper describes our research in the development of MEMS capacitive force sensors that have already demonstrated their effectiveness in the areas of cell mechanics and Drosophila flight dynamics studies. (review article)

  18. Design of Small MEMS Microphone Array Systems for Direction Finding of Outdoors Moving Vehicles

    Directory of Open Access Journals (Sweden)

    Xin Zhang

    2014-03-01

    Full Text Available In this paper, a MEMS microphone array system scheme is proposed which implements real-time direction of arrival (DOA estimation for moving vehicles. Wind noise is the primary source of unwanted noise on microphones outdoors. A multiple signal classification (MUSIC algorithm is used in this paper for direction finding associated with spatial coherence to discriminate between the wind noise and the acoustic signals of a vehicle. The method is implemented in a SHARC DSP processor and the real-time estimated DOA is uploaded through Bluetooth or a UART module. Experimental results in different places show the validity of the system and the deviation is no bigger than 6° in the presence of wind noise.

  19. CMOS based capacitance to digital converter circuit for MEMS sensor

    Science.gov (United States)

    Rotake, D. R.; Darji, A. D.

    2018-02-01

    Most of the MEMS cantilever based system required costly instruments for characterization, processing and also has large experimental setups which led to non-portable device. So there is a need of low cost, highly sensitive, high speed and portable digital system. The proposed Capacitance to Digital Converter (CDC) interfacing circuit converts capacitance to digital domain which can be easily processed. Recent demand microcantilever deflection is part per trillion ranges which change the capacitance in 1-10 femto farad (fF) range. The entire CDC circuit is designed using CMOS 250nm technology. Design of CDC circuit consists of a D-latch and two oscillators, namely Sensor controlled oscillator (SCO) and digitally controlled oscillator (DCO). The D-latch is designed using transmission gate based MUX for power optimization. A CDC design of 7-stage, 9-stage and 11-stage tested for 1-18 fF and simulated using mentor graphics Eldo tool with parasitic. Since the proposed design does not use resistance component, the total power dissipation is reduced to 2.3621 mW for CDC designed using 9-stage SCO and DCO.

  20. Capacitive MEMS-based sensors : thermo-mechanical stability and charge trapping

    NARCIS (Netherlands)

    van Essen, M.C.

    2009-01-01

    Micro-Electro Mechanical Systems (MEMS) are generally characterized as miniaturized systems with electrostatically driven moving parts. In many cases, the electrodes are capacitively coupled. This basic scheme allows for a plethora of specifications and functionality. This technology has presently

  1. Ultrananocrystalline diamond films with optimized dielectric properties for advanced RF MEMS capacitive switches

    Science.gov (United States)

    Sumant, Anirudha V.; Auciello, Orlando H.; Mancini, Derrick C.

    2013-01-15

    An efficient deposition process is provided for fabricating reliable RF MEMS capacitive switches with multilayer ultrananocrystalline (UNCD) films for more rapid recovery, charging and discharging that is effective for more than a billion cycles of operation. Significantly, the deposition process is compatible for integration with CMOS electronics and thereby can provide monolithically integrated RF MEMS capacitive switches for use with CMOS electronic devices, such as for insertion into phase array antennas for radars and other RF communication systems.

  2. Sensing and Control Electronics for Low-Mass Low-Capacitance MEMS Accelerometers

    Science.gov (United States)

    2002-05-01

    junction transistors ( BJT ) to be used. Field effect tran- sistors (FET), such as MOSFETs, should be used in capacitive sensing for thin-film MEMS...continuous-time voltage sensing circuit can be realized. Our noise model also shows the noise is dependent on transistor sizes and parasitic capacitance...and indicates there is an optimum transistor size that achieves capacitance matching of the sensor, the sensor/circuit interconnection and the

  3. SoundCompass: a distributed MEMS microphone array-based sensor for sound source localization.

    Science.gov (United States)

    Tiete, Jelmer; Domínguez, Federico; da Silva, Bruno; Segers, Laurent; Steenhaut, Kris; Touhafi, Abdellah

    2014-01-23

    Sound source localization is a well-researched subject with applications ranging from localizing sniper fire in urban battlefields to cataloging wildlife in rural areas. One critical application is the localization of noise pollution sources in urban environments, due to an increasing body of evidence linking noise pollution to adverse effects on human health. Current noise mapping techniques often fail to accurately identify noise pollution sources, because they rely on the interpolation of a limited number of scattered sound sensors. Aiming to produce accurate noise pollution maps, we developed the SoundCompass, a low-cost sound sensor capable of measuring local noise levels and sound field directionality. Our first prototype is composed of a sensor array of 52 Microelectromechanical systems (MEMS) microphones, an inertial measuring unit and a low-power field-programmable gate array (FPGA). This article presents the SoundCompass's hardware and firmware design together with a data fusion technique that exploits the sensing capabilities of the SoundCompass in a wireless sensor network to localize noise pollution sources. Live tests produced a sound source localization accuracy of a few centimeters in a 25-m2 anechoic chamber, while simulation results accurately located up to five broadband sound sources in a 10,000-m2 open field.

  4. Numerical Analysis of CNC Milling Chatter Using Embedded Miniature MEMS Microphone Array System

    Directory of Open Access Journals (Sweden)

    Pang-Li Wang

    2018-01-01

    Full Text Available With the increasingly common use of industrial automation for mass production, there are many computer numerical control (CNC machine tools that require the collection of data from intelligent sensors in order to analyze their processing quality. In general, for high speed rotating machines, an accelerometer can be attached on the spindle to collect the data from the detected vibration of the CNC. However, due to their cost, accelerometers have not been widely adopted for use with typical CNC machine tools. This study sought to develop an embedded miniature MEMS microphone array system (Radius 5.25 cm, 8 channels to discover the vibration source of the CNC from spatial phase array processing. The proposed method utilizes voice activity detection (VAD to distinguish between the presence and absence of abnormal noise in the pre-stage, and utilizes the traditional direction of arrival method (DOA via multiple signal classification (MUSIC to isolate the spatial orientation of the noise source in post-processing. In the numerical simulation, the non-interfering noise source location is calibrated in the anechoic chamber, and is tested with real milling processing in the milling machine. As this results in a high background noise level, the vibration sound source is more accurate in the presented energy gradation graphs as compared to the traditional MUSIC method.

  5. SoundCompass: A Distributed MEMS Microphone Array-Based Sensor for Sound Source Localization

    Directory of Open Access Journals (Sweden)

    Jelmer Tiete

    2014-01-01

    Full Text Available Sound source localization is a well-researched subject with applications ranging from localizing sniper fire in urban battlefields to cataloging wildlife in rural areas. One critical application is the localization of noise pollution sources in urban environments, due to an increasing body of evidence linking noise pollution to adverse effects on human health. Current noise mapping techniques often fail to accurately identify noise pollution sources, because they rely on the interpolation of a limited number of scattered sound sensors. Aiming to produce accurate noise pollution maps, we developed the SoundCompass, a low-cost sound sensor capable of measuring local noise levels and sound field directionality. Our first prototype is composed of a sensor array of 52 Microelectromechanical systems (MEMS microphones, an inertial measuring unit and a low-power field-programmable gate array (FPGA. This article presents the SoundCompass’s hardware and firmware design together with a data fusion technique that exploits the sensing capabilities of the SoundCompass in a wireless sensor network to localize noise pollution sources. Live tests produced a sound source localization accuracy of a few centimeters in a 25-m2 anechoic chamber, while simulation results accurately located up to five broadband sound sources in a 10,000-m2 open field.

  6. SoundCompass: A Distributed MEMS Microphone Array-Based Sensor for Sound Source Localization

    Science.gov (United States)

    Tiete, Jelmer; Domínguez, Federico; da Silva, Bruno; Segers, Laurent; Steenhaut, Kris; Touhafi, Abdellah

    2014-01-01

    Sound source localization is a well-researched subject with applications ranging from localizing sniper fire in urban battlefields to cataloging wildlife in rural areas. One critical application is the localization of noise pollution sources in urban environments, due to an increasing body of evidence linking noise pollution to adverse effects on human health. Current noise mapping techniques often fail to accurately identify noise pollution sources, because they rely on the interpolation of a limited number of scattered sound sensors. Aiming to produce accurate noise pollution maps, we developed the SoundCompass, a low-cost sound sensor capable of measuring local noise levels and sound field directionality. Our first prototype is composed of a sensor array of 52 Microelectromechanical systems (MEMS) microphones, an inertial measuring unit and a low-power field-programmable gate array (FPGA). This article presents the SoundCompass’s hardware and firmware design together with a data fusion technique that exploits the sensing capabilities of the SoundCompass in a wireless sensor network to localize noise pollution sources. Live tests produced a sound source localization accuracy of a few centimeters in a 25-m2 anechoic chamber, while simulation results accurately located up to five broadband sound sources in a 10,000-m2 open field. PMID:24463431

  7. Sound Source Localization through 8 MEMS Microphones Array Using a Sand-Scorpion-Inspired Spiking Neural Network.

    Science.gov (United States)

    Beck, Christoph; Garreau, Guillaume; Georgiou, Julius

    2016-01-01

    Sand-scorpions and many other arachnids perceive their environment by using their feet to sense ground waves. They are able to determine amplitudes the size of an atom and locate the acoustic stimuli with an accuracy of within 13° based on their neuronal anatomy. We present here a prototype sound source localization system, inspired from this impressive performance. The system presented utilizes custom-built hardware with eight MEMS microphones, one for each foot, to acquire the acoustic scene, and a spiking neural model to localize the sound source. The current implementation shows smaller localization error than those observed in nature.

  8. Sound Source Localization Through 8 MEMS Microphones Array Using a Sand-Scorpion-Inspired Spiking Neural Network

    Directory of Open Access Journals (Sweden)

    Christoph Beck

    2016-10-01

    Full Text Available Sand-scorpions and many other arachnids perceive their environment by using their feet to sense ground waves. They are able to determine amplitudes the size of an atom and locate the acoustic stimuli with an accuracy of within 13° based on their neuronal anatomy. We present here a prototype sound source localization system, inspired from this impressive performance. The system presented utilizes custom-built hardware with eight MEMS microphones, one for each foot, to acquire the acoustic scene, and a spiking neural model to localize the sound source. The current implementation shows smaller localization error than those observed in nature.

  9. Center-Shift Method for the Characterization of Dielectric Charging in RF MEMS Capacitive Switches

    NARCIS (Netherlands)

    Herfst, R.W.; Schmitz, Jurriaan

    2008-01-01

    Radio frequency (RF) micro-electro-mechanical systems (MEMS) capacitive switches show great promise for use in wireless communication devices such as mobile phones, but for the successful application of these switches their reliability needs to be demonstrated. One of the main factors that limits

  10. Kelvin probe study of laterally inhomogeneous dielectric charging and charge diffusion in RF MEMS capacitive switches

    NARCIS (Netherlands)

    Herfst, R.W.; Steeneken, P.G.; Schmitz, J.; Mank, A.J.G.; van Gils, M.

    2008-01-01

    In this paper we use Scanning Kelvin Probe Microscopy (SKPM) to detect charge in the dielectric of RF MEMS capacitive switches. We observe a laterally inhomogeneous distribution. Laterally inhomogeneous dielectric charging leads to a narrowing of the C-V curve [1], and can lead to stiction of the

  11. Experimental Validation of Topology Optimization for RF MEMS Capacitive Switch Design

    DEFF Research Database (Denmark)

    Philippine, Mandy Axelle; Zareie, Hosein; Sigmund, Ole

    2013-01-01

    In this paper, we present 30 distinct RF MEMS capacitive switch designs that are the product of topology optimizations that control key mechanical properties such as stiffness, response to intrinsic stress gradients, and temperature sensitivity. The designs were evaluated with high-accuracy simul...

  12. MEMS capacitive pressure sensor monolithically integrated with CMOS readout circuit by using post CMOS processes

    Science.gov (United States)

    Jang, Munseon; Yun, Kwang-Seok

    2017-12-01

    In this paper, we presents a MEMS pressure sensor integrated with a readout circuit on a chip for an on-chip signal processing. The capacitive pressure sensor is formed on a CMOS chip by using a post-CMOS MEMS processes. The proposed device consists of a sensing capacitor that is square in shape, a reference capacitor and a readout circuitry based on a switched-capacitor scheme to detect capacitance change at various environmental pressures. The readout circuit was implemented by using a commercial 0.35 μm CMOS process with 2 polysilicon and 4 metal layers. Then, the pressure sensor was formed by wet etching of metal 2 layer through via hole structures. Experimental results show that the MEMS pressure sensor has a sensitivity of 11 mV/100 kPa at the pressure range of 100-400 kPa.

  13. Modeling and non-linear responses of MEMS capacitive accelerometer

    Directory of Open Access Journals (Sweden)

    Sri Harsha C.

    2014-01-01

    Full Text Available A theoretical investigation of an electrically actuated beam has been illustrated when the electrostatic-ally actuated micro-cantilever beam is separated from the electrode by a moderately large gap for two distinct types of geometric configurations of MEMS accelerometer. Higher order nonlinear terms have been taken into account for studying the pull in voltage analysis. A nonlinear model of gas film squeezing damping, another source of nonlinearity in MEMS devices is included in obtaining the dynamic responses. Moreover, in the present work, the possible source of nonlinearities while formulating the mathematical model of a MEMS accelerometer and their influences on the dynamic responses have been investigated. The theoretical results obtained by using MATLAB has been verified with the results obtained in FE software and has been found in good agreement. Criterion towards stable micro size accelerometer for each configuration has been investigated. This investigation clearly provides an understanding of nonlinear static and dynamics characteristics of electrostatically micro cantilever based device in MEMS.

  14. A Capacitance-To-Digital Converter for MEMS Sensors for Smart Applications.

    Science.gov (United States)

    Pérez Sanjurjo, Javier; Prefasi, Enrique; Buffa, Cesare; Gaggl, Richard

    2017-06-07

    The use of MEMS sensors has been increasing in recent years. To cover all the applications, many different readout circuits are needed. To reduce the cost and time to market, a generic capacitance-to-digital converter (CDC) seems to be the logical next step. This work presents a configurable CDC designed for capacitive MEMS sensors. The sensor is built with a bridge of MEMS, where some of them function with pressure. Then, the capacitive to digital conversion is realized using two steps. First, a switched-capacitor (SC) preamplifier is used to make the capacitive to voltage (C-V) conversion. Second, a self-oscillated noise-shaping integrating dual-slope (DS) converter is used to digitize this magnitude. The proposed converter uses time instead of amplitude resolution to generate a multibit digital output stream. In addition it performs noise shaping of the quantization error to reduce measurement time. This article shows the effectiveness of this method by measurements performed on a prototype, designed and fabricated using standard 0.13 µm CMOS technology. Experimental measurements show that the CDC achieves a resolution of 17 bits, with an effective area of 0.317 mm², which means a pressure resolution of 1 Pa, while consuming 146 µA from a 1.5 V power supply.

  15. Topology Optimization of Stressed Capacitive RF MEMS Switches

    DEFF Research Database (Denmark)

    Philippine, Mandy A.; Sigmund, Ole; Rebeiz, Gabriel M.

    2013-01-01

    Geometry design can improve a capacitive radio-frequency microelectromechanical system switch's reliability by reducing the impacts of intrinsic biaxial stresses and stress gradients on the switch's membrane. Intrinsic biaxial stresses cause stress stiffening, whereas stress gradients cause out-o...

  16. Silicon Carbide Capacitive High Temperature MEMS Strain Transducer

    Science.gov (United States)

    2012-03-22

    it is a little difficult to measure using traditional methods. One option could be using the 72 Wheatstone bridge method. Although this method is...commonly used for resistive bridges , it can be adapted to inductive or capacitive bridges . The more difficult task that lies ahead is attachment

  17. Structural Designing of a MEMS Capacitive Accelerometer for Low Temperature Coefficient and High Linearity.

    Science.gov (United States)

    He, Jiangbo; Zhou, Wu; Yu, Huijun; He, Xiaoping; Peng, Peng

    2018-02-22

    The low temperature coefficient and high linearity of the input-output characteristics are both required for high-performance microelectromechanical systems (MEMS) capacitive accelerometers. In this work, a structural designing of a bulk MEMS capacitive accelerometer is developed for both low temperature coefficient and high linearity. Firstly, the contrary effect of the wide-narrow gaps ratio (WNGR) on the temperature coefficient of the scale factor (TCSF) and linearity error is discussed. Secondly, the ability of an improved structure that can avoid the contrary effect is illustrated. The improved structure is proposed in our previous work for reducing the temperature coefficient of bias (TCB) and TCSF. Within the improved structure, both the TCSF and linearity error decrease with increasing WNGR. Then, the precise designing of the improved structure is developed for achieving lower TCB, TCSF, and linearity error. Finally, the precise structural designing is experimentally verified.

  18. Comb structure analysis of the capacitive sensitive element in MEMS-accelerometer

    Science.gov (United States)

    Shalimov, Andrew; Timoshenkov, Sergey; Korobova, Natalia; Golovinskiy, Maxim; Timoshenkov, Alexey; Zuev, Egor; Berezueva, Svetlana; Kosolapov, Andrey

    2015-05-01

    In this paper analysis of comb design for the sensing element MEMS accelerometer with longitudinal displacement of the inertial mass under the influence of acceleration to obtain the necessary parameters for the further construction of an electronic circuit for removal and signal processing has been done. Fixed on the stator the inertia mass has the ability to move under the influence of acceleration along the longitudinal structure. As a result the distance between the fixed and movable combs, and hence the capacitance in the capacitors have been changed. Measuring the difference of these capacitances you can estimate the value of the applied acceleration. Furthermore, managing combs that should apply an electrostatic force for artificial deviation of the inertial mass may be used for the initial sensitive elements culling. Also in this case there is a change of capacitances, which can be measured by the comb and make a decision about the spoilage presence or absence.

  19. MEMS variable capacitance devices utilizing the substrate: II. Zipping varactors

    KAUST Repository

    Elshurafa, Amro M.

    2010-03-22

    This paper, the second and last in this series, introduces PolyMUMPS zipping varactors that exploit the substrate and provide a high tuning range and a high quality factor. Building on the important findings of part I of this paper, the substrate was utilized effectively once again in the design and fabrication of zipping varactors to attain devices with very good performance. Two zipping varactors are proposed, analysed theoretically, simulated, fabricated and tested successfully. The tuning range, quality factor and actuation voltage of those varactors are 4.5, 16.4, 55 V and 4.2, 17, 55 V respectively. Finally, and based on one of the proposed zipping varactors, a very large capacitance value varactor array, with a tuning range of 5.3, was designed and tested. To the best of our knowledge, these zipping varactors exhibit the best reported characteristics in PolyMUMPS to date within their category in terms of tuning range, quality factor, required actuation voltage and total area consumed. © 2010 IOP Publishing Ltd.

  20. MEMS variable capacitance devices utilizing the substrate: I. Novel devices with a customizable tuning range

    KAUST Repository

    Elshurafa, Amro M.

    2010-03-22

    This paper, the first in a series of two, presents a paradigm shift in the design of MEMS parallel plate PolyMUMPS variable capacitance devices by proposing two structures that utilize the substrate and are able to provide predetermined, customizable, tuning ranges and/or ratios. The proposed structures can provide theoretical tuning ranges anywhere from 4.9 to 35 and from 3.4 to 26 respectively with a simple, yet effective, layout modification as opposed to the previously reported devices where the tuning range is fixed and cannot be varied. Theoretical analysis is carried out and verified with measurements of fabricated devices. The first proposed device possessed initially a tuning range of 4.4. Two variations of the structure having tuning ranges of 3 and 3.4, all at 1 GHz, were also successfully developed and tested. The second proposed variable capacitance device behaved as a switch. © 2010 IOP Publishing Ltd.

  1. A Power-Efficient Capacitive Read-Out Circuit With Parasitic-Cancellation for MEMS Cochlea Sensors.

    Science.gov (United States)

    Wang, Shiwei; Koickal, Thomas Jacob; Hamilton, Alister; Mastropaolo, Enrico; Cheung, Rebecca; Abel, Andrew; Smith, Leslie S; Wang, Lei

    2016-02-01

    This paper proposes a solution for signal read-out in the MEMS cochlea sensors that have very small sensing capacitance and do not have differential sensing structures. The key challenge in such sensors is the significant signal degradation caused by the parasitic capacitance at the MEMS-CMOS interface. Therefore, a novel capacitive read-out circuit with parasitic-cancellation mechanism is developed; the equivalent input capacitance of the circuit is negative and can be adjusted to cancel the parasitic capacitance. Chip results prove that the use of parasitic-cancellation is able to increase the sensor sensitivity by 35 dB without consuming any extra power. In general, the circuit follows a low-degradation low-amplification approach which is more power-efficient than the traditional high-degradation high-amplification approach; it employs parasitic-cancellation to reduce the signal degradation and therefore a lower gain is required in the amplification stage. Besides, the chopper-stabilization technique is employed to effectively reduce the low-frequency circuit noise and DC offsets. As a result of these design considerations, the prototype chip demonstrates the capability of converting a 7.5 fF capacitance change of a 1-Volt-biased 0.5 pF capacitive sensor pair into a 0.745 V signal-conditioned output at the cost of only 165.2 μW power consumption.

  2. On the Modeling of an Open Channel MEMS Based Capacitive Flow Sensor

    Directory of Open Access Journals (Sweden)

    Vafaghi Maryam

    2008-11-01

    Full Text Available In this paper an open channel MEMS capacitive flow sensor has been designed based on a microplate deflection measuring. Proposed flow sensor consists with two separate units, one for sensing the static fluid pressure and the other for sensing the fluid static and dynamic pressure. The governing equation whose solution holds the answer to all our questions about the sensor’s characteristics is a nonlinear elasto-electrostatic equation. Sensor’s static response and mechanical behavior of the sensing elements in a channel have been simulated numerically by using of Step by Step Linearization Method. The sensor stability has been examined and the stable region of the sensor has been studied. The effect of fluid velocity and static pressure on stability limit of the sensor has been investigated and the effect of bias voltage on sensor sensitivity has been studied.

  3. Tailoring design and fabrication of capacitive RF MEMS switches for K-band applications

    Science.gov (United States)

    Quaranta, Fabio; Persano, Anna; Capoccia, Giovanni; Taurino, Antonietta; Cola, Adriano; Siciliano, Pietro; Lucibello, Andrea; Marcelli, Romolo; Proietti, Emanuela; Bagolini, Alvise; Margesin, Benno; Bellutti, Pierluigi; Iannacci, Jacopo

    2015-05-01

    Shunt capacitive radio-frequency microelectromechanical (RF MEMS) switches were modelled, fabricated and characterized in the K-band domain. Design allowed to predict the RF behaviour of the switches as a function of the bridge geometric parameters. The modelled switches were fabricated on silicon substrate, using a surface micromachining approach. In addition to the geometric parameters, the material structure in the bridge-actuator area was modified for switches fabricated on the same wafer, thanks to the removal/addition of two technological steps of crucial importance for RF MEMS switches performance, which are the use of the sacrificial layer and the deposition of a floating metal layer on the actuator. Surface profilometry analysis was used to check the material layer structure in the different regions of the bridge area as well as to investigate the mechanical behaviour of the moveable bridge under the application of a loaded force. The RF behaviour of all the fabricated switches was measured, observing the impact on the isolation of the manipulation of the bridge size and of the variations in the fabrication process.

  4. Identification of Capacitive MEMS Accelerometer Structure Parameters for Human Body Dynamics Measurements

    Directory of Open Access Journals (Sweden)

    Vincas Benevicius

    2013-08-01

    Full Text Available Due to their small size, low weight, low cost and low energy consumption, MEMS accelerometers have achieved great commercial success in recent decades. The aim of this research work is to identify a MEMS accelerometer structure for human body dynamics measurements. Photogrammetry was used in order to measure possible maximum accelerations of human body parts and the bandwidth of the digital acceleration signal. As the primary structure the capacitive accelerometer configuration is chosen in such a way that sensing part measures on all three axes as it is 3D accelerometer and sensitivity on each axis is equal. Hill climbing optimization was used to find the structure parameters. Proof-mass displacements were simulated for all the acceleration range that was given by the optimization problem constraints. The final model was constructed in Comsol Multiphysics. Eigenfrequencies were calculated and model’s response was found, when vibration stand displacement data was fed into the model as the base excitation law. Model output comparison with experimental data was conducted for all excitation frequencies used during the experiments.

  5. On the Modeling of a MEMS Based Capacitive Accelerometer for Measurement of Tractor Seat Vibration

    Directory of Open Access Journals (Sweden)

    M. Alidoost

    2010-04-01

    Full Text Available Drivers of heavy vehicles often face with higher amplitudes of frequencies range between 1-80 Hz. Hence, this range of frequency results in temporary or even sometimes permanent damages to the health of drivers. Examples for these problems are damages to the vertebral column and early tiredness, which both reduce the driver’s performance significantly. One solution to this problem is to decrease the imposed vibration to the driver’s seat by developing an active seat system. These systems require an online measuring unit to sense vibrations transferred to the seat. The measuring unit can include a capacitive micro-accelerometer on the basis of MEMS which measure online vibrations on the seat. In this study, the mechanical behavior of a capacitive micro-accelerometer for the vibration range applied to a tractor seat has been simulated. The accelerometer is capable to measure step, impact and harmonic external excitations applied to the system. The results of the study indicate that, with increasing the applied voltage, the system sensitivity also increases, but the measuring range of vibrations decreases and vice versa. The modeled accelerometer, at damping ratio of 0.67 is capable to measure accelerations within the frequency range of lower than 130 Hz.

  6. Novel RF MEMS capacitive switches with design flexibility for multi-frequency operation

    Science.gov (United States)

    Gopalakrishnan, Sarath; DasGupta, Amitava; Nair, Deleep R.

    2017-09-01

    RF MEMS capacitive shunt switches with a dielectric-on-metal (DOM) capacitor, which are widely used for microwave applications in the communication field, suffer from some serious drawbacks. A significant shift is observed in the resonant frequency of these switches due to the reduction in the down-state capacitance caused by the surface roughness of the dielectric layer. In order to achieve accurate down-state capacitance, a thin layer of floating metal is deposited on the dielectric layer converting the DOM switch to a metal-insulator metal (MIM) switch. The MIM switch opens up interesting possibilities in the design, such as achieving flexibility in the operating frequency of the switch. This paper reports a novel method to achieve design flexibility for multi-frequency operation in switches, by effectively utilizing the equipotential nature of the floating metal in the MIM capacitor. Unlike in a DOM switch, the resonant frequency can be varied by changing merely the length of the floating metal, without having to make any other structural modifications. This enables to have switches operating at different frequency on the same wafer. The beams of the switches are also designed in such a way as to provide stress resilience, thereby preventing buckling. This paper presents the design, simulation, fabrication and characterization of a switch that operates in the X-band. The fabricated switches show excellent stress resilience. The characterized switch demonstrates a reduction in the resonant frequency in proportion to an increase in the length of the floating metal, hence validating the design flexibility proposed in this paper.

  7. The Mechanical and Electrical Effects of MEMS Capacitive Pressure Sensor Based 3C-SiC for Extreme Temperature

    Directory of Open Access Journals (Sweden)

    N. Marsi

    2014-01-01

    Full Text Available This paper discusses the mechanical and electrical effects on 3C-SiC and Si thin film as a diaphragm for MEMS capacitive pressure sensor operating for extreme temperature which is 1000 K. This work compares the design of a diaphragm based MEMS capacitive pressure sensor employing 3C-SiC and Si thin films. A 3C-SiC diaphragm was bonded with a thickness of 380 μm Si substrate, and a cavity gap of 2.2 μm is formed between the wafers. The MEMS capacitive pressure sensor designs were simulated using COMSOL ver 4.3 software to compare the diaphragm deflection, capacitive performance analysis, von Mises stress, and total electrical energy performance. Both materials are designed with the same layout dimensional with different thicknesses of the diaphragm which are 1.0 μm, 1.6 μm, and 2.2 μm. It is observed that the 3C-SiC thin film is far superior materials to Si thin film mechanically in withstanding higher applied pressures and temperatures. For 3C-SiC and Si, the maximum von Mises stress achieved is 148.32 MPa and 125.48 MPa corresponding to capacitance value which is 1.93 pF and 1.22 pF, respectively. In terms of electrical performance, the maximum output capacitance of 1.93 pF is obtained with less total energy of 5.87 × 10−13 J, thus having a 50% saving as compared to Si.

  8. A Micro-Machined Microphone Based on a Combination of Electret and Field-Effect Transistor.

    Science.gov (United States)

    Shin, Kumjae; Jeon, Junsik; West, James Edward; Moon, Wonkyu

    2015-08-18

    Capacitive-type transduction is now widely used in MEMS microphones. However, its sensitivity decreases with reducing size, due to decreasing air gap capacitance. In the present study, we proposed and developed the Electret Gate of Field Effect Transistor (ElGoFET) transduction based on an electret and FET (field-effect-transistor) as a novel mechanism of MEMS microphone transduction. The ElGoFET transduction has the advantage that the sensitivity is dependent on the ratio of capacitance components in the transduction structure. Hence, ElGoFET transduction has high sensitivity even with a smaller air gap capacitance, due to a miniaturization of the transducer. A FET with a floating-gate electrode embedded on a membrane was designed and fabricated and an electret was fabricated by ion implantation with Ga(+) ions. During the assembly process between the FET and the electret, the operating point of the FET was characterized using the static response of the FET induced by the electric field due to the trapped positive charge at the electret. Additionally, we evaluated the microphone performance of the ElGoFET by measuring the acoustic response in air using a semi-anechoic room. The results confirmed that the proposed transduction mechanism has potential for microphone applications.

  9. A Micro-Machined Microphone Based on a Combination of Electret and Field-Effect Transistor

    Directory of Open Access Journals (Sweden)

    Kumjae Shin

    2015-08-01

    Full Text Available Capacitive-type transduction is now widely used in MEMS microphones. However, its sensitivity decreases with reducing size, due to decreasing air gap capacitance. In the present study, we proposed and developed the Electret Gate of Field Effect Transistor (ElGoFET transduction based on an electret and FET (field-effect-transistor as a novel mechanism of MEMS microphone transduction. The ElGoFET transduction has the advantage that the sensitivity is dependent on the ratio of capacitance components in the transduction structure. Hence, ElGoFET transduction has high sensitivity even with a smaller air gap capacitance, due to a miniaturization of the transducer. A FET with a floating-gate electrode embedded on a membrane was designed and fabricated and an electret was fabricated by ion implantation with Ga+ ions. During the assembly process between the FET and the electret, the operating point of the FET was characterized using the static response of the FET induced by the electric field due to the trapped positive charge at the electret. Additionally, we evaluated the microphone performance of the ElGoFET by measuring the acoustic response in air using a semi-anechoic room. The results confirmed that the proposed transduction mechanism has potential for microphone applications.

  10. Development of a MEMS dual-axis differential capacitance floating element shear stress sensor

    Energy Technology Data Exchange (ETDEWEB)

    Barnard, Casey [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States); Griffin, Benjamin [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)

    2015-09-01

    A single-axis MEMS wall shear stress sensor with differential capacitive transduction method is produced. Using a synchronous modulation and demodulation interface circuit, the system is capable of making real time measurements of both mean and fluctuating wall shear stress. A sensitivity of 3.44 mV/Pa is achieved, with linearity in response demonstrated up to testing limit of 2 Pa. Minimum detectable signals of 340 μPa at 100 Hz and 120 μPa at 1 kHz are indicated, with a resonance of 3.5 kHz. Multiple full scale wind tunnel tests are performed, producing spectral measurements of turbulent boundary layers in wind speeds ranging up to 0.5 Ma (18 Pa of mean wall shear stress). The compact packaging allows for minimally invasive installation, and has proven relatively robust over multiple testing events. Temperature sensitivity, likely due to poor CTE matching of packaged materials, is an ongoing concern being addressed. These successes are being directly leveraged into a development plan for a dual-axis wall shear stress sensor, capable of producing true vector estimates at the wall.

  11. On Using the Volatile Mem-Capacitive Effect of TiO2 Resistive Random Access Memory to Mimic the Synaptic Forgetting Process

    Science.gov (United States)

    Sarkar, Biplab; Mills, Steven; Lee, Bongmook; Pitts, W. Shepherd; Misra, Veena; Franzon, Paul D.

    2018-02-01

    In this work, we report on mimicking the synaptic forgetting process using the volatile mem-capacitive effect of a resistive random access memory (RRAM). TiO2 dielectric, which is known to show volatile memory operations due to migration of inherent oxygen vacancies, was used to achieve the volatile mem-capacitive effect. By placing the volatile RRAM candidate along with SiO2 at the gate of a MOS capacitor, a volatile capacitance change resembling the forgetting nature of a human brain is demonstrated. Furthermore, the memory operation in the MOS capacitor does not require a current flow through the gate dielectric indicating the feasibility of obtaining low power memory operations. Thus, the mem-capacitive effect of volatile RRAM candidates can be attractive to the future neuromorphic systems for implementing the forgetting process of a human brain.

  12. Sputtered Encapsulation as Wafer Level Packaging for Isolatable MEMS Devices: A Technique Demonstrated on a Capacitive Accelerometer

    Directory of Open Access Journals (Sweden)

    Azrul Azlan Hamzah

    2008-11-01

    Full Text Available This paper discusses sputtered silicon encapsulation as a wafer level packaging approach for isolatable MEMS devices. Devices such as accelerometers, RF switches, inductors, and filters that do not require interaction with the surroundings to function, could thus be fully encapsulated at the wafer level after fabrication. A MEMSTech 50g capacitive accelerometer was used to demonstrate a sputtered encapsulation technique. Encapsulation with a very uniform surface profile was achieved using spin-on glass (SOG as a sacrificial layer, SU-8 as base layer, RF sputtered silicon as main structural layer, eutectic gold-silicon as seal layer, and liquid crystal polymer (LCP as outer encapsulant layer. SEM inspection and capacitance test indicated that the movable elements were released after encapsulation. Nanoindentation test confirmed that the encapsulated device is sufficiently robust to withstand a transfer molding process. Thus, an encapsulation technique that is robust, CMOS compatible, and economical has been successfully developed for packaging isolatable MEMS devices at the wafer level.

  13. MEMS Capacitive Micro Thermometer Based on Tip Deflection of Bimetallic Cantilever Beam

    Directory of Open Access Journals (Sweden)

    Shahriar Kouravand

    2006-08-01

    Full Text Available Thermometry is an interested field in physics and metrology. A capacitive micro thermometer based on the tip deflection of bimetallic cantilever beam was designed and described in this paper. The governing thermo mechanical equations were derived and solved analytically. The temperature rising was expressed with respect to capacitance change of a comb drive. The results of beam deflection were compared well with the existing results.

  14. Reliable before-fabrication forecasting of normal and touch mode MEMS capacitive pressure sensor: modeling and simulation

    Science.gov (United States)

    Jindal, Sumit Kumar; Mahajan, Ankush; Raghuwanshi, Sanjeev Kumar

    2017-10-01

    An analytical model and numerical simulation for the performance of MEMS capacitive pressure sensors in both normal and touch modes is required for expected behavior of the sensor prior to their fabrication. Obtaining such information should be based on a complete analysis of performance parameters such as deflection of diaphragm, change of capacitance when the diaphragm deflects, and sensitivity of the sensor. In the literature, limited work has been carried out on the above-stated issue; moreover, due to approximation factors of polynomials, a tolerance error cannot be overseen. Reliable before-fabrication forecasting requires exact mathematical calculation of the parameters involved. A second-order polynomial equation is calculated mathematically for key performance parameters of both modes. This eliminates the approximation factor, and an exact result can be studied, maintaining high accuracy. The elimination of approximation factors and an approach of exact results are based on a new design parameter (δ) that we propose. The design parameter gives an initial hint to the designers on how the sensor will behave once it is fabricated. The complete work is aided by extensive mathematical detailing of all the parameters involved. Next, we verified our claims using MATLAB® simulation. Since MATLAB® effectively provides the simulation theory for the design approach, more complicated finite element method is not used.

  15. Development of Unified Fabrication Process and Testing of MEMS Based Comb and Crab Type Capacitive Accelerometers for Navigational Applications

    Directory of Open Access Journals (Sweden)

    R. K. Bhan

    2016-08-01

    Full Text Available MEMS based accelerometers have already penetrated defense programs including navigation control in addition to their usual deployment in automotive, consumer and industrial markets because of their improved reliability, accuracy and excellent price performance. This paper discussed about the fabrication and testing of single axis capacitive accelerometer structures based on change in area (comb-type and change in gap (Crab type sensing principles. The accelerometers are designed for ±30 g acceleration range. A common fabrication process flow is designed for the fabrication of both types of accelerometers that are fabricated by using a three mask dissolved wafer process (DWP. Both the accelerometers showed a scale factor sensitivity of >60 mV/g at ±1 g flip test. Vibration and sensitivity testing at higher frequency was conducted on shaker table using a half sine wave shock (HSWS of 2 ms. Using HSWS test, a sensitivity in the range of ~60 mV/g was obtained for both comb or crab type structures in the 0-30 g range. It can be further tuned upto 100 mV/g by increasing the gain of the capacitance Read Out Integrated Circuit (ROIC. However, performance of the comb type of accelerometers gets affected in – 30 g to – 0 g range due to deep boron diffusion induced residual stress. The crab accelerometers showed almost linear (nonlinearity:<3 % FS behavior in the whole ±30 g range. Other tests like bias stability, bandwidth, bias temperature coefficient etc. indicate that devices are fully functional. All these observations validate our design and unified process.

  16. Design of a MEMS Capacitive Comb-drive Micro-accelerometer with Sag Optimization

    Directory of Open Access Journals (Sweden)

    B. D. PANT

    2009-10-01

    Full Text Available The current paper presents an optimization study for the designing of a highly sensitive inertial grade capacitive accelerometer based on comb-drive actuation and sensing. The proof mass, suspension system (beams or tethers, stators and rotors have to be realized through an HAR (high aspect ratio DRIE (deep reactive ion etching process for which process optimization has already been done at our laboratory. As the proof mass is a bulk micro-machined structure having a mass in milligram range, the optimum positioning of the tethers on the proof mass is important to have minimum sag, necessary to reduce the off-axis sensitivity. The optimization for the positioning of the tethers has been carried out using a commercial software tool ANSYSTM Multiphysics. The accelerometer has been modeled analytically to predict its characteristics. The dependency of sensitivity on the dimensions of the suspension beams (tethers has also been verified using the above FEM software tool. The present device has been designed to deliver a high sensitivity of 13.6 mV/g/V for low-g applications.

  17. Design and application of a metal wet-etching post-process for the improvement of CMOS-MEMS capacitive sensors

    International Nuclear Information System (INIS)

    Tsai, Ming-Han; Sun, Chih-Ming; Liu, Yu-Chia; Fang, Weileun; Wang, Chuanwei

    2009-01-01

    This study presents a process design methodology to improve the performance of a CMOS-MEMS gap-closing capacitive sensor. In addition to the standard CMOS process, the metal wet-etching approach is employed as the post-CMOS process to realize the present design. The dielectric layers of the CMOS process are exploited to form the main micro mechanical structures of the sensor. The metal layers of the CMOS process are used as the sensing electrodes and sacrificial layers. The advantages of the sensor design are as follows: (1) the parasitic capacitance is significantly reduced by the dielectric structure, (2) in-plane and out-of-plane sensing gaps can be reduced to increase the sensitivity, and (3) plate-type instead of comb-type out-of-plane sensing electrodes are available to increase the sensing electrode area. To demonstrate the feasibility of the present design, a three-axis capacitive CMOS-MEMS accelerometers chip is implemented and characterized. Measurements show that the sensitivities of accelerometers reach 11.5 mV G −1 (in the X-, Y-axes) and 7.8 mV G −1 (in the Z-axis), respectively, which are nearly one order larger than existing designs. Moreover, the detection of 10 mG excitation using the three-axis accelerometer is demonstrated for both in-plane and out-of-plane directions

  18. Mems cost analysis from laboratory to industry

    CERN Document Server

    Freng, Ron Lawes

    2016-01-01

    The World of MEMS; Chapter 2: Basic Fabrication Processes; Chapter 3: Surface Microengineering. High Aspect Ratio Microengineering; Chapter 5: MEMS Testing; Chapter 6: MEMS Packaging. Clean Rooms, Buildings and Plant; Chapter 8: The MEMSCOST Spreadsheet; Chapter 9: Product Costs - Accelerometers. Product Costs - Microphones. MEMS Foundries. Financial Reporting and Analysis. Conclusions.

  19. MEMS cost analysis from laboratory to industry

    CERN Document Server

    Freng, Ron Lawes

    2016-01-01

    The World of MEMS; Chapter 2: Basic Fabrication Processes; Chapter 3: Surface Microengineering. High Aspect Ratio Microengineering; Chapter 5: MEMS Testing; Chapter 6: MEMS Packaging. Clean Rooms, Buildings and Plant; Chapter 8: The MEMSCOST Spreadsheet; Chapter 9: Product Costs - Accelerometers. Product Costs - Microphones. MEMS Foundries. Financial Reporting and Analysis. Conclusions.

  20. Determination of Multiple Spring Constants, Gaps and Pull Down Voltages in MEMS CRAB Type Microaccelerometer Using Near Pull Down Capacitance Voltage Measurements

    Directory of Open Access Journals (Sweden)

    R. K. Bhan

    2015-09-01

    Full Text Available A simple experimental method based on capacitance voltage (CV measurements is presented to extract the spring constants (k different actuation voltages and gaps, in crab type capacitive MEMS accelerometer sensors. It is shown that in addition to main spring action provided by the legs of the structure, the additional spring constants related to the interaction of main spring-proof mass joint and corner region of the proof mass also contribute to change in capacitance. The proposed approach is used in resolving and measuring these model parameters simultaneously because all of them can be extracted from the just one CV measurement. It is found that this additional k varies by more than a factor of 10 across the 6-inch wafer. Furthermore, zero bias capacitance C0, zero bias gap g0, main spring constant k and initial pull down voltage Vpd1 vary by factors of 2.4, 2.38, 30 and 3 respectively. The method also allows us to extract different values of pull down and spring constants associated with different regions of crab structure. The experimental results agree well with the theoretical predictions and reported trends in literatures. The method is routinely applied while fabricating the actual prototype sensors fabricated in our laboratory.

  1. Virtual design and optimization studies for industrial silicon microphones applying tailored system-level modeling

    Science.gov (United States)

    Kuenzig, Thomas; Dehé, Alfons; Krumbein, Ulrich; Schrag, Gabriele

    2018-05-01

    Maxing out the technological limits in order to satisfy the customers’ demands and obtain the best performance of micro-devices and-systems is a challenge of today’s manufacturers. Dedicated system simulation is key to investigate the potential of device and system concepts in order to identify the best design w.r.t. the given requirements. We present a tailored, physics-based system-level modeling approach combining lumped with distributed models that provides detailed insight into the device and system operation at low computational expense. The resulting transparent, scalable (i.e. reusable) and modularly composed models explicitly contain the physical dependency on all relevant parameters, thus being well suited for dedicated investigation and optimization of MEMS devices and systems. This is demonstrated for an industrial capacitive silicon microphone. The performance of such microphones is determined by distributed effects like viscous damping and inhomogeneous capacitance variation across the membrane as well as by system-level phenomena like package-induced acoustic effects and the impact of the electronic circuitry for biasing and read-out. The here presented model covers all relevant figures of merit and, thus, enables to evaluate the optimization potential of silicon microphones towards high fidelity applications. This work was carried out at the Technical University of Munich, Chair for Physics of Electrotechnology. Thomas Kuenzig is now with Infineon Technologies AG, Neubiberg.

  2. The Capacitance and Temperature Effects of the SiC- and Si-Based MEMS Pressure Sensor

    International Nuclear Information System (INIS)

    Marsi, N; Majlis, B Y; Hamzah, A A; Mohd, F

    2013-01-01

    This project develops the pressure sensor for monitoring the extreme conditions inside the gas turbine engine. The capacitive-based instead of piezoresistive-based pressure sensor is employed to avoid temperature drift. The deflecting (top) plate and the fixed (bottom) plate generate the capacitance, which is proportional to the applied input pressure and temperature. Two thin film materials of four different sizes are employed for the top plate, namely cubic silicon carbide (3C-SiC) and silicon (Si). Their performances in term of the sensitivity and linearity of the capacitance versus pressure are simulated at the temperature of 27°C, 500°C, 700°C and 1000°C. The results show that both materials display linear characteristics for temperature up to 500°C, although SiC-based sensor shows higher sensitivity. However, when the temperatures are increased to 700°C and 1000°C, the Si- based pressure sensor starts to malfunction at 50 MPa. However, the SiC-based pressure sensor continues to demonstrate high sensitivity and linearity at such high temperature and pressure. This paper validates the need of employing silicon carbide instead of silicon for sensing of extreme environments.

  3. Implementation of a Virtual Microphone Array to Obtain High Resolution Acoustic Images

    OpenAIRE

    Izquierdo, Alberto; Villacorta, Juan J.; del Val, Lara; Suárez, Luis; Suárez, David

    2017-01-01

    Using arrays with digital MEMS (Micro-Electro-Mechanical System) microphones and FPGA-based (Field Programmable Gate Array) acquisition/processing systems allows building systems with hundreds of sensors at a reduced cost. The problem arises when systems with thousands of sensors are needed. This work analyzes the implementation and performance of a virtual array with 6400 (80 × 80) MEMS microphones. This virtual array is implemented by changing the position of a physical array of 64 (8 × 8) ...

  4. 76 FR 68207 - Certain Silicon Microphone Packages and Products Containing the Same; Determination To Rescind in...

    Science.gov (United States)

    2011-11-03

    ...] [FR Doc No: 2011-28488] INTERNATIONAL TRADE COMMISSION [Investigation No. 337-TA-720] Certain Silicon... importation, or the sale within the United States after importation of certain silicon microphone packages and...'') prohibiting the unlicensed entry into the United States of MemsTech silicon microphone packages that infringe...

  5. New Technology-Driven Approaches in the Design of Preamplifiers for Condenser Microphones

    DEFF Research Database (Denmark)

    Haas-Christensen, Jelena

    The topic of this thesis is the design of CMOS preamplifiers for condenser microphones. Increasingly popular type of condenser microphones are MEMS (micro-electro-mechanical) microphones which pose a stringent requirements to the design of interface electronics among other due to their increased...... noise. Besides that, as MEMS microphones are easy to integrate with CMOS circuitry, CMOS circuit design gains importance because it can contribute to the overall improved performance of the system by introducing extra functionalities. Possible methods of sensing a signal from the microphone...... are investigated and explained in the thesis. The method resulting in the overall best performance has been chosen for implementation. Due to the fact that the electronics noise performance is an important factor for minimization of the overall noise of the system, with 1/f noise dominant at low frequencies...

  6. Noise in miniature microphones.

    Science.gov (United States)

    Thompson, Stephen C; LoPresti, Janice L; Ring, Eugene M; Nepomuceno, Henry G; Beard, John J; Ballad, William J; Carlson, Elmer V

    2002-02-01

    The internal noise spectrum in miniature electret microphones of the type used in the manufacture of hearing aids is measured. An analogous circuit model of the microphone is empirically fit to the measured data and used to determine the important sources of noise within the microphone. The dominant noise source is found to depend on the frequency. Below 40 Hz and above 9 kHz, the dominant source is electrical noise from the amplifier circuit needed to buffer the electrical signal from the microphone diaphragm. Between approximately 40 Hz and 1 kHz, the dominant source is thermal noise originating in the acoustic flow resistance of the small hole pierced in the diaphragm to equalize barometric pressure. Between approximately 1 kHz and 9 kHz, the noise originates in the acoustic flow resistances of sound entering the microphone and propagating to the diaphragm. To further reduce the microphone internal noise in the audio band requires attacking these sources. A prototype microphone having reduced acoustical noise is measured and discussed.

  7. Ultra-low-noise preamplifier for condenser microphones.

    Science.gov (United States)

    Starecki, Tomasz

    2010-12-01

    The paper presents the design of a low-noise preamplifier dedicated for condenser measurement microphones used in high sensitivity applications, in which amplifier noise is the main factor limiting sensitivity of the measurements. In measurement microphone preamplifiers, the dominant source of noise at lower frequencies is the bias resistance of the input stage. In the presented solution, resistors were connected to the input stage by means of switches. The switches are opened during measurements, which disconnects the resistors from the input stage and results in noise reduction. Closing the switches allows for fast charging of the microphone capacitance. At low frequencies the noise of the designed preamplifier is a few times lower in comparison to similar, commercially available instruments.

  8. Parylene for MEMS applications

    Science.gov (United States)

    Yao, Tze-Jung

    The goal of this thesis is to utilize Parylene, a room-temperature chemical-vapor-deposited (CVD) polymer, for MicroElectroMechanical Systems (MEMS) applications. The identified unique properties of Parylene are used to fabricate various micromachining devices such as thermopneumatic microvalve, in-channel microflow restrictor, and electret microphones. First, the properties of Parylene as a MEMS material are reviewed. The electrical, thermal, surface, and mechanical properties are first compared with that of other materials and further studied specifically for MEMS applications. The high dielectric strength (determined as 250V/mum) of Parylene makes it suitable for use as an electrical insulation material. However, its high resistivity causes un-desired charging effects first described in polymer-based electrostatic devices. The undesired high pull-in voltage, "bounce-back," and "snap-down" effects caused by dielectric charging are studied. Second, to make Parylene as a surface-micromachined material, a process that overcomes the stiction problem has to be developed. Thus, a new technique that combines wet-acetone dissolution and dry BrF3 dry etching has developed to overcome the stiction problem, which prevents Parylene microstructures from freestanding. The devices of mm*mm size with high yield are demonstrated using this technology. A thermopneumatic microvalve with a corrugated silicone/Parylene composite membrane is designed, fabricated, and tested for gas flows of several slpm and inlet pressures of tens of psi. The lowest power consumption to turn off the gas flow is determined to be 73mW. A silicone-based microfluidic coupler, initially designed for microvalve packaging, is also demonstrated for its ability to connect the external macrofluidic world to microfluidic devices. The demonstrated "quick-connect" microfluidic coupler has low leakage, is reusable, and can maintain good seal up to 60 psi. An in-channel microflow restrictor is also demonstrated with

  9. Hollow core MOEMS Bragg grating microphone for distributed and remote sensing

    DEFF Research Database (Denmark)

    Reck, Kasper; Østergaard, Christian; Thomsen, Erik Vilain

    2011-01-01

    We present the design and fabrication of a completely new high sensitivity all-optical frequency modulated MOEMS microphone for distributed and remote sensing applications. Due to immunity to electromagnetic interference, no parasitic capacitances and easy wavelength division multiplexing (WDM) c...... most suitable for high stress sensing, e.g. in structural health monitoring. The MOEMS microphone presented here has a calculated static pressure sensitivity approximately 104 times larger than conventional FBGs [2,3]....

  10. MEMS packaging

    CERN Document Server

    Hsu , Tai-Ran

    2004-01-01

    MEMS Packaging discusses the prevalent practices and enabling techniques in assembly, packaging and testing of microelectromechanical systems (MEMS). The entire spectrum of assembly, packaging and testing of MEMS and microsystems, from essential enabling technologies to applications in key industries of life sciences, telecommunications and aerospace engineering is covered. Other topics included are bonding and sealing of microcomponents, process flow of MEMS and microsystems packaging, automated microassembly, and testing and design for testing.The Institution of Engineering and Technology is

  11. Status of the MEMS Industry: Evolution or MEMS Markets and of the Industrial Infrastructure

    Directory of Open Access Journals (Sweden)

    J. C. ELOY

    2007-12-01

    Full Text Available The MEMS markets in 2006 reached US$ 5.8 B and we can estimate that the 2011 MEMS markets will reach more than US $ 10.7 B, with very diverse growth rate depending on the devices and the applications: silicon microphone and RF MEMS are the fastest growing applications but the existing applications like ink jet head and pressure sensors are still growing at a rate of 4 % per year at least. The industrial infrastructure is changing, with more and more companies going to 8’’ manufacturing facilities and the strong growth of the MEMS foundry business. MEMS business is changing for more structured industry and high volume production.

  12. Silicon microphones - a Danish perspective

    DEFF Research Database (Denmark)

    Bouwstra, Siebe; Storgaard-Larsen, Torben; Scheeper, Patrick

    1998-01-01

    Two application areas of microphones are discussed, those for precision measurement and those for hearing instruments. Silicon microphones are under investigation for both areas, and Danish industry plays a key role in both. The opportunities of silicon, as well as the challenges and expectations......, are discussed. For precision measurement the challenge for silicon is large, while for hearing instruments silicon seems to be very promising....

  13. Optimal design of an electret microphone metal-oxide-semiconductor field-effect transistor preamplifier.

    Science.gov (United States)

    van der Donk, A G; Bergveld, P

    1992-04-01

    A theoretical noise analysis of the combination of a capacitive microphone and a preamplifier containing a metal-oxide-semiconductor field-effect transistor (MOSFET) and a high-value resistive bias element is given. It is found that the output signal-to-noise ratio for a source follower and for a common-source circuit is almost the same. It is also shown that the output noise can be reduced by making the microphone capacitance as well as the bias resistor as large as possible, and furthermore by keeping the parasitic gate capacitances as low as possible and finally by using an optimum value for the gate area of the MOSFET. The main noise source is the thermal noise of the gate leakage resistance of the MOSFET. It is also shown that short-channel MOSFETs produce more thermal channel noise than longer channel devices.

  14. Modeling of a bimetallic MEMS-based infrared detector

    Science.gov (United States)

    Pevtsov, E. Ph; Breev, S. V.; Demenkova, T. A.

    2018-01-01

    In work techniques of calculations of the key parameters of the bimetal capacitive IR detectors matrix are presented. Sensitivity characteristics of the bimetal detector were calculated and prototype model of detector in the form of bimetallic console was produced. The possibility of use of capacitive MEMS-receivers on basis of bimetallic effect as an alternative to pyroelectric and microbolometer IR detectors is shown.

  15. Two-wire Interface for Digital Microphones

    NARCIS (Netherlands)

    Groothedde, Wouter; Klumperink, Eric A.M.; Nauta, Bram; Eschauzier, Rudolphe Gustave Hubertus; van Rijn, Nico

    2003-01-01

    A two-wire interface for a digital microphone circuit includes a power line and a ground line. The interface utilizes the ground line as a "voltage active line" to transmit both clock and data signals between the digital microphone circuit and a receiving circuit. The digital microphone circuit

  16. Two-Wire interface for digital microphones

    NARCIS (Netherlands)

    Groothedde, Wouter; Klumperink, Eric A.M.; Nauta, Bram; Eschauzier, Rudolphe Gustave Hubertus; van Rijn, Nico

    2005-01-01

    A two-wire interface for a digital microphone circuit includes a power line and a ground line. The interface utilizes the ground line as a "voltage active line" to transmit both clock and data signals between the digital microphone circuit and a receiving circuit. The digital microphone circuit

  17. Characterization of dielectric charging in RF MEMS

    NARCIS (Netherlands)

    Herfst, R.W.; Huizing, H.G.A.; Steeneken, P.G.; Schmitz, Jurriaan

    2005-01-01

    Capacitive RF MEMS switches show great promise for use in wireless communication devices such as mobile phones, but the successful application of these switches is hindered by the reliability of the devices: charge injection in the dielectric layer (SiN) can cause irreversible stiction of the moving

  18. MEMS Calculator

    Science.gov (United States)

    SRD 166 MEMS Calculator (Web, free access)   This MEMS Calculator determines the following thin film properties from data taken with an optical interferometer or comparable instrument: a) residual strain from fixed-fixed beams, b) strain gradient from cantilevers, c) step heights or thicknesses from step-height test structures, and d) in-plane lengths or deflections. Then, residual stress and stress gradient calculations can be made after an optical vibrometer or comparable instrument is used to obtain Young's modulus from resonating cantilevers or fixed-fixed beams. In addition, wafer bond strength is determined from micro-chevron test structures using a material test machine.

  19. The acoustic center of laboratory standard microphones

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Rasmussen, Knud; Jacobsen, Finn

    2006-01-01

    An experimental procedure is described for obtaining the effective acoustic distance between pairs of microphones coupled by a free field, leading to the determination of the position of the acoustic center of the microphones. The procedure, which is based on measuring the modulus of the electric...

  20. General considerations of noise in microphone preamplifiers

    NARCIS (Netherlands)

    van der Donk, A.G.H.; van der Donk, A.G.H.; Voorthuyzen, J.A.; Voorthuyzen, J.A.; Bergveld, Piet

    1991-01-01

    In this paper a study of the noise performance of electret microphone systems as a part of hearing aids is presented. The signal-to-noise ratio of the microphone-preamplifier combination, containing a field-effect transistor (FET) and a high value resistive bias element in a hybrid configuration, is

  1. Sodium immersible high temperature microphone design description

    International Nuclear Information System (INIS)

    Gavin, A.P.; Anderson, T.T.; Janicek, J.J.

    1975-02-01

    Argonne National Laboratory has developed a rugged high-temperature (HT) microphone for use as a sodium-immersed acoustic monitor in Liquid Metal Fast Breeder Reactors (LMFBRs). Microphones of this design have been extensively tested in room temperature water, in air up to 1200 0 F, and in sodium up to 1200 0 F. They have been successfully installed and employed as acoustic monitors in several operating liquid metal systems. The design, construction sequence, calibration, and testing of these microphones are described. 6 references. (U.S.)

  2. Mapping Speech Spectra from Throat Microphone to Close-Speaking Microphone: A Neural Network Approach

    Directory of Open Access Journals (Sweden)

    B. Yegnanarayana

    2007-01-01

    Full Text Available Speech recorded from a throat microphone is robust to the surrounding noise, but sounds unnatural unlike the speech recorded from a close-speaking microphone. This paper addresses the issue of improving the perceptual quality of the throat microphone speech by mapping the speech spectra from the throat microphone to the close-speaking microphone. A neural network model is used to capture the speaker-dependent functional relationship between the feature vectors (cepstral coefficients of the two speech signals. A method is proposed to ensure the stability of the all-pole synthesis filter. Objective evaluations indicate the effectiveness of the proposed mapping scheme. The advantage of this method is that the model gives a smooth estimate of the spectra of the close-speaking microphone speech. No distortions are perceived in the reconstructed speech. This mapping technique is also used for bandwidth extension of telephone speech.

  3. Mic it! microphones, microphone techniques, and their impact on the final mix

    CERN Document Server

    Corbett, Ian

    2014-01-01

    Capture great sound in the first place, and spend less time ""fixing it in the mix"" with Ian Corbett's Mic It! Microphones, Microphone Techniques, and Their Impact on the Final Mix. With his expert guidance, you'll quickly understand essential audio concepts as they relate to microphones and mic techniques, and learn how to apply them to your recording situation. Whether you only ever buy one microphone, are equipping a studio on a budget, or have a vast selection of great mics to use, you'll learn to better use whatever tools you have. Mic It! gives you the background to design and discover

  4. Study and Design of Differential Microphone Arrays

    CERN Document Server

    Benesty, Jacob

    2013-01-01

    Microphone arrays have attracted a lot of interest over the last few decades since they have the potential to solve many important problems such as noise reduction/speech enhancement, source separation, dereverberation, spatial sound recording, and source localization/tracking, to name a few. However, the design and implementation of microphone arrays with beamforming algorithms is not a trivial task when it comes to processing broadband signals such as speech. Indeed, in most sensor arrangements, the beamformer tends to have a frequency-dependent response. One exception, perhaps, is the family of differential microphone arrays (DMAs) that have the promise to form frequency-independent responses. Moreover, they have the potential to attain high directional gains with small and compact apertures. As a result, this type of microphone arrays has drawn much research and development attention recently. This book is intended to provide a systematic study of DMAs from a signal processing perspective. The primary obj...

  5. Micromachined capacitive pressure sensor with signal conditioning electronics

    DEFF Research Database (Denmark)

    Fragiacomo, Giulio

    . The developed MEMS consist of hermetically sealed vacuum cavities surrounded by two heavily doped silicon layers which constitute the plates of a capacitor. The top plate is also the sensing element being a thin diaphragm that deflects when pressure is applied, thus increasing the capacitance (i.e. the output...

  6. A single-mask thermal displacement sensor in MEMS

    NARCIS (Netherlands)

    Hogervorst, R.P.; Krijnen, B.; Krijnen, B.; Brouwer, Dannis Michel; Engelen, Johannes Bernardus Charles; Staufer, U.

    Position sensing in MEMS is often based on the principle of varying capacitance [1]. Alternative position sensing principles include using integrated optical waveguides [2] or varying thermal conductance [3]. Lantz et al demonstrated a thermal displacement sensor achieving nanometre resolution on a

  7. MEMS direction finding acoustic sensor

    Science.gov (United States)

    Karunasiri, Gamani; Alves, Fabio; Swan, William

    2017-06-01

    Conventional directional sound sensing systems employ an array of spatially separated microphones to achieve directivity. However, there are insects such as the Ormia ochracea fly that can determine the direction of sound using a miniature hearing organ much smaller than the wavelength of sound it detects. The fly's eardrums are coupled mechanically with a separation of only 0.5 mm and yet have a remarkable sensitivity to the direction of sound. The MEMS based sensor mimicking the fly's hearing system was fabricated using an SOI substrate with a 25 μm device layer. The sensor consists of two 1.5 mm x1.6 mm wings connected in the middle by a 2.7 mm x 30 μm bridge. The entire structure is connected to the substrate by two torsional legs at the center. The frequency response of the sensor showed two resonance frequencies at approximately 1.1 kHz (rocking) and 1.5 kHz (bending). The resonance at 1.1 kHz is due to rocking of the wings by twisting the legs and the other at 1.5 kHz is due to bending of the bridge. The response of the sensor was probed electronically using comb finger capacitors integrated to the edges of the wings and with the help of an MS3110 chip. A peak output voltage of about 9V/Pa was measured for sound incident normal to the device at the resonance frequency of the bending mode. The bearing of the incident sound under these conditions could be determined to within a few degrees. These findings indicate the potential use of the MEMS sensor to locate sound sources with high accuracy.

  8. Biomaterials for MEMS

    CERN Document Server

    Chiao, Mu

    2011-01-01

    This book serves as a guide for practicing engineers, researchers, and students interested in MEMS devices that use biomaterials and biomedical applications. It is also suitable for engineers and researchers interested in MEMS and its applications but who do not have the necessary background in biomaterials.Biomaterials for MEMS highlights important features and issues of biomaterials that have been used in MEMS and biomedical areas. Hence this book is an essential guide for MEMS engineers or researchers who are trained in engineering institutes that do not provide the background or knowledge

  9. Design of circular differential microphone arrays

    CERN Document Server

    Benesty, Jacob; Cohen, Israel

    2015-01-01

    Recently, we proposed a completely novel and efficient way to design differential beamforming algorithms for linear microphone arrays. Thanks to this very flexible approach, any order of differential arrays can be designed. Moreover, they can be made robust against white noise amplification, which is the main inconvenience in these types of arrays. The other well-known problem with linear arrays is that electronic steering is not really feasible.  In this book, we extend all these fundamental ideas to circular microphone arrays and show that we can design small and compact differential arrays of any order that can be electronically steered in many different directions and offer a good degree of control of the white noise amplification problem, high directional gain, and frequency-independent response. We also present a number of practical examples, demonstrating that differential beamforming with circular microphone arrays is likely one of the best candidates for applications involving speech enhancement (i....

  10. Fiberoptic microphone using a polymeric cavity

    Science.gov (United States)

    Wang, Wei-Chih; Soetanto, William; Gu, Kebin

    2011-04-01

    The fabrication and experimental investigation of a fiberoptic microphone is described. The sensing element is a silicon diaphragm with gold thin film coating that is positioned inside a silicone rubber mold at the end of a single mode optical fiber. Thus, a Fabry-Perot interferometer is formed between the inner fiber and the diaphragm. An acoustic pressure change is detected by using the developed microphone. The polymeric cavity and silicon diaphragm-based system exhibits excellent physicochemical properties with a small, simple, low cost, and lightweight design. The system is also electromagnetic interference / radio frequency interference immunity due to the use of fiberoptics.

  11. Two-microphone Separation of Speech Mixtures

    DEFF Research Database (Denmark)

    2006-01-01

    In this demonstration we show the separation of 3-7 mixed speech sources based on information from two microphones. Separation with background noise is demonstrated too. The algorithms are described in 1] Michael Syskind Pedersen, DeLiang Wang, Jan Larsen and Ulrik Kjems: "Two-microphone Separation...... of Speech Mixtures," 2006, submited for journal publication. See also, [2] Michael Syskind Pedersen, DeLiang Wang, Jan Larsen and Ulrik Kjems: "Overcomplete Blind Source Separation by Combining ICA and Binary Time-Frequency Masking," in proceedings of IEEE International workshop on Machine Learning...

  12. 77 FR 64446 - Wireless Microphones Proceeding

    Science.gov (United States)

    2012-10-22

    ... to balance the needs of potential new classes of wireless microphone licensees with those of other... undercut that balance by significantly reducing the amount of spectrum available for other uses, such as by..., a space capacity-rated for 3,000 people; for sports venues, a minimum of 10,000 seats for indoors...

  13. Locating noise sources with a microphone array

    International Nuclear Information System (INIS)

    Bale, A.; Johnson, D.

    2010-01-01

    Noise pollution is one of the contributors to the public opposition of wind farms. Most of the noise produced by turbines is caused by the aerodynamic interactions between the turbine blades and the surrounding air. This poster presentation discussed a series of aeroacoustic tests conducted to account for the different in vortical structures caused by the rotation of the blades. Microphone arrays were used measure and locate the source of noise. A beam forming technique was used to measure the noise using an algorithm that identified a scanning grid on a plane where the source was thought to be located. It delayed each microphone's signal by the length of time required for the sound to travel from the scan position to each microphone, and accounted for the amplitudes according to the distance from the scan position to each microphone. Demonstration test cases were conducted using piezo buzzers attached to aluminum bars and mounted to the shaft of a DC motor that produced a rotational diameter of 0.95 meter. The buzzers were placed 1 meter from the array. Multiple sound sources at the same frequency were identified, and the moving sources were accurately measured and located. tabs., figs.

  14. Compressive sensing with a spherical microphone array

    DEFF Research Database (Denmark)

    Fernandez Grande, Efren; Xenaki, Angeliki

    2016-01-01

    A wave expansion method is proposed in this work, based on measurements with a spherical microphone array, and formulated in the framework provided by Compressive Sensing. The method promotes sparse solutions via ‘1-norm minimization, so that the measured data are represented by few basis functions...

  15. Two-microphone Separation of Speech Mixtures

    DEFF Research Database (Denmark)

    2006-01-01

    Matlab source code for underdetermined separation of instaneous speech mixtures. The algorithm is described in [1] Michael Syskind Pedersen, DeLiang Wang, Jan Larsen and Ulrik Kjems: ''Two-microphone Separation of Speech Mixtures,'' 2006, submitted for journal publoication. See also, [2] Michael...

  16. PECVD silicon nitride diaphragms for condenser microphones

    NARCIS (Netherlands)

    Scheeper, P.R.; Scheeper, P.R.; Voorthuyzen, J.A.; Voorthuyzen, J.A.; Bergveld, Piet

    1991-01-01

    The application of plasma-enhanced chemical vapour deposited (PECVD) silicon nitride as a diaphragm material for condenser microphones has been investigated. By means of adjusting the SiH4/NH3 gas-flow composition, silicon-rich silicon nitride films have been obtained with a relatively low tensile

  17. Filtering microphonics in dark matter germanium experiments

    International Nuclear Information System (INIS)

    Morales, J.; Garcia, E.; Ortiz de Solorzano, A.; Morales, A.; Nunz-Lagos, R.; Puimedon, J.; Saenz, C.; Villar, J.A.

    1992-01-01

    A technique for reducing the microphonic noise in a germanium spectrometer used in dark matter particles searches is described. Filtered energy spectra, corresponding to 48.5 kg day of data in a running experiment in the Canfranc tunnel are presented. Improvements of this filtering procedure with respect to the method of rejecting those events not distributed evenly in time are also discussed. (orig.)

  18. SOI silicon on glass for optical MEMS

    DEFF Research Database (Denmark)

    Larsen, Kristian Pontoppidan; Ravnkilde, Jan Tue; Hansen, Ole

    2003-01-01

    A newly developed fabrication method for fabrication of single crystalline Si (SCS) components on glass, utilizing Deep Reactive Ion Etching (DRIE) of a Silicon On Insulator (SOI) wafer is presented. The devices are packaged at wafer level in a glass-silicon-glass (GSG) stack by anodic bonding...... and a final sealing at the interconnects can be performed using a suitable polymer. Packaged MEMS on glass are advantageous within Optical MEMS and for sensitive capacitive devices. We report on experiences with bonding SOI to Pyrex. Uniform DRIE shallow and deep etching was achieved by a combination...... of an optimized device layout and an optimized process recipe. The behavior of the buried oxide membrane when used as an etch stop for the through-hole etch is described. No harmful buckling or fracture of the membrane is observed for an oxide thickness below 1 μm, but larger and more fragile released structures...

  19. APPLICATION OF MICROPHONE ARRAYS FOR DISTANT SPEECH CAPTURE

    Directory of Open Access Journals (Sweden)

    M. B. Stolbov

    2015-07-01

    Full Text Available Application of microphone arrays and beamforming techniques for speech information collection has significant advantages compared to systems operating with a single microphone. This paper presents a brief overview of microphone array systems for collecting distant speech information. The paper is based on an analysis of publications on the use of microphone arrays for speech information collection tasks, as well as on the author’s experience in the development and practical application of planar microphone arrays. The paper describes the main stages of the development of systems for remote capture of audio information. It provides a review of the main applications of microphone arrays, the basic types of microphone arrays and their features. The bulk of the paper deals with planar microphone arrays. We analyze the work of microphone arrays in different acoustic environments. The paper contains the basic equations for calculating the parameters of equidistant planar microphone arrays. Some methods of designing non-equidistant arrays are also mentioned (a list of references is included. We also provide a list of basic digital signal processing algorithms for planar microphone arrays, as well as a list of references on processing algorithms in the frequency domain. The paper includes a list of foreign companies offering systems based on microphone arrays for a wide range of tasks associated with the processing of speech and audio signals. We describe some state-of-the-art speech information collection systems based on microphone arrays. Some promising directions for the development of speech information collection systems using microphone arrays are described in conclusion. The material of the review is usable in designing of microphone arrays for specific practical applications.

  20. A structural health monitoring system with ultrasonic MEMS transducers

    Science.gov (United States)

    Guldiken, Rasim O.; Onen, Onursal; Gul, Mustafa; Catbas, F. Necati

    2011-04-01

    In this paper, we will summarize our efforts on exploring guided acoustic waves generated by MEMS ultrasonic transducers enabling a non-destructive, ultra-low powered, wireless SHM system. State-of-the-art SHM systems employ bulk piezoelectric transducers. However, they are not environmentally benign (contain lead), not cost feasible for monitoring every bridge in the U.S., require significant power for operation, lack integration capability for wireless interrogation, need precise matching layers, and have only 25-50 percent fractional bandwidth, limiting the detection resolution. To alleviate most of these shortcomings, a low impedance MEMS transducer, called a capacitive micromachined ultrasonic transducer (CMUT), is explored.

  1. Modularly Integrated MEMS Technology

    National Research Council Canada - National Science Library

    Eyoum, Marie-Angie N

    2006-01-01

    Process design, development and integration to fabricate reliable MEMS devices on top of VLSI-CMOS electronics without damaging the underlying circuitry have been investigated throughout this dissertation...

  2. Microelectromechanical Systems (MEMS)

    Indian Academy of Sciences (India)

    conference included a theme symposium on MEMS that spanned three days with paper presentations covering various aspects of MEMS technology. Out of all the papers presented in the symposium, we selected fifteen papers based on their reviews and other feedback and asked the authors to write the papers for ...

  3. Hydrogel microphones for stealthy underwater listening

    Science.gov (United States)

    Gao, Yang; Song, Jingfeng; Li, Shumin; Elowsky, Christian; Zhou, You; Ducharme, Stephen; Chen, Yong Mei; Zhou, Qin; Tan, Li

    2016-08-01

    Exploring the abundant resources in the ocean requires underwater acoustic detectors with a high-sensitivity reception of low-frequency sound from greater distances and zero reflections. Here we address both challenges by integrating an easily deformable network of metal nanoparticles in a hydrogel matrix for use as a cavity-free microphone. Since metal nanoparticles can be densely implanted as inclusions, and can even be arranged in coherent arrays, this microphone can detect static loads and air breezes from different angles, as well as underwater acoustic signals from 20 Hz to 3 kHz at amplitudes as low as 4 Pa. Unlike dielectric capacitors or cavity-based microphones that respond to stimuli by deforming the device in thickness directions, this hydrogel device responds with a transient modulation of electric double layers, resulting in an extraordinary sensitivity (217 nF kPa-1 or 24 μC N-1 at a bias of 1.0 V) without using any signal amplification tools.

  4. A novel vibration mode testing method for cylindrical resonators based on microphones.

    Science.gov (United States)

    Zhang, Yongmeng; Wu, Yulie; Wu, Xuezhong; Xi, Xiang; Wang, Jianqiu

    2015-01-16

    Non-contact testing is an important method for the study of the vibrating characteristic of cylindrical resonators. For the vibratory cylinder gyroscope excited by piezo-electric electrodes, mode testing of the cylindrical resonator is difficult. In this paper, a novel vibration testing method for cylindrical resonators is proposed. This method uses a MEMS microphone, which has the characteristics of small size and accurate directivity, to measure the vibration of the cylindrical resonator. A testing system was established, then the system was used to measure the vibration mode of the resonator. The experimental results show that the orientation resolution of the node of the vibration mode is better than 0.1°. This method also has the advantages of low cost and easy operation. It can be used in vibration testing and provide accurate results, which is important for the study of the vibration mode and thermal stability of vibratory cylindrical gyroscopes.

  5. A Novel Vibration Mode Testing Method for Cylindrical Resonators Based on Microphones

    Directory of Open Access Journals (Sweden)

    Yongmeng Zhang

    2015-01-01

    Full Text Available Non-contact testing is an important method for the study of the vibrating characteristic of cylindrical resonators. For the vibratory cylinder gyroscope excited by piezo-electric electrodes, mode testing of the cylindrical resonator is difficult. In this paper, a novel vibration testing method for cylindrical resonators is proposed. This method uses a MEMS microphone, which has the characteristics of small size and accurate directivity, to measure the vibration of the cylindrical resonator. A testing system was established, then the system was used to measure the vibration mode of the resonator. The experimental results show that the orientation resolution of the node of the vibration mode is better than 0.1°. This method also has the advantages of low cost and easy operation. It can be used in vibration testing and provide accurate results, which is important for the study of the vibration mode and thermal stability of vibratory cylindrical gyroscopes.

  6. A robust parasitic-insensitive successive approximation capacitance-to-digital converter

    KAUST Repository

    Omran, Hesham

    2014-09-01

    In this paper, we present a capacitive sensor digital interface circuit using true capacitance-domain successive approximation that is independent of supply voltage. Robust operation is achieved by using a charge amplifier stage and multiple comparison technique. The interface circuit is insensitive to parasitic capacitances, offset voltages, and charge injection, and is not prone to noise coupling. The proposed design achieves very low temperature sensitivity of 25ppm/oC. A coarse-fine programmable capacitance array allows digitizing a wide capacitance range of 16pF with 12.5-bit quantization limited resolution in a compact area of 0.07mm2. The fabricated prototype is experimentally verified using on-chip sensor and off-chip MEMS capacitive pressure sensor. © 2014 IEEE.

  7. Piezoelectric Zinc Oxide Based MEMS Acoustic Sensor

    Directory of Open Access Journals (Sweden)

    Aarti Arora

    2008-04-01

    Full Text Available An acoustic sensors exhibiting good sensitivity was fabricated using MEMS technology having piezoelectric zinc oxide as a dielectric between two plates of capacitor. Thin film zinc oxide has structural, piezoelectric and optical properties for surface acoustic wave (SAW and bulk acoustic wave (BAW devices. Oxygen effficient films are transparent and insulating having wide applications for sensors and transducers. A rf sputtered piezoelectric ZnO layer transforms the mechanical deflection of a thin etched silicon diaphragm into a piezoelectric charge. For 25-micron thin diaphragm Si was etched in tetramethylammonium hydroxide solution using bulk micromachining. This was followed by deposition of sandwiched structure composed of bottom aluminum electrode, sputtered 3 micron ZnO film and top aluminum electrode. A glass having 1 mm diameter hole was bonded on backside of device to compensate sound pressure in side the cavity. The measured value of central capacitance and dissipation factor of the fabricated MEMS acoustic sensor was found to be 82.4pF and 0.115 respectively, where as the value of ~176 pF was obtained for the rim capacitance with a dissipation factor of 0.138. The response of the acoustic sensors was reproducible for the devices prepared under similar processing conditions under different batches. The acoustic sensor was found to be working from 30Hz to 8KHz with a sensitivity of 139µV/Pa under varying acoustic pressure.

  8. A novel MEMS S-springs vibrating ring gyroscope with atmosphere package

    OpenAIRE

    Zhiwei Kou; Jun Liu; Huiliang Cao; Yunbo Shi; Jianjun Ren; Yingjie Zhang

    2017-01-01

    This study presents a new MEMS vibrating ring gyroscope (VRG), which is driven by electrostatic force and detected by capacitance. A novel ring resonator with eight S-shaped symmetrical supporting springs is developed based on the advantageous characteristics of a thin-shell vibrating gyroscope. The capacitance electrodes, including the drive electrodes, the sense electrodes and the mode control electrodes, are designed according to the vibration characteristics of the ring resonator and the ...

  9. Low voltage RF MEMS variable capacitor with linear C-V response

    KAUST Repository

    Elshurafa, Amro M.

    2012-07-23

    An RF MEMS variable capacitor, fabricated in the PolyMUMPS process and tuned electrostatically, possessing a linear capacitance-voltage response is reported. The measured quality factor of the device was 17 at 1GHz, while the tuning range was 1.2:1 and was achieved at an actuation DC voltage of 8V only. Further, the linear regression coefficient was 0.98. The variable capacitor was created such that it has both vertical and horizontal capacitances present. As the top suspended plate moves towards the bottom fixed plate, the vertical capacitance increases whereas the horizontal capacitance decreases simultaneously such that the sum of the two capacitances yields a linear capacitance-voltage relation. © 2012 The Institution of Engineering and Technology.

  10. An acoustical array combining microphones and piezoelectric devices.

    Science.gov (United States)

    Matsumoto, Mitsuharu; Hashimoto, Shuji

    2008-04-01

    This paper describes an acoustical array combining microphones and piezoelectric devices. Conventional microphone arrays have been widely utilized to realize noise reduction, sound separation and direction of arrival estimation system. However, when a conventional microphone array is mounted on a real system, such as a machine, vehicle or robot, the microphones are set extremely close to the system's actual body. In such cases, the noise from the system itself, such as motors, gears, and engines, namely internal noise, often becomes a troublesome problem. It is difficult to reduce internal noise utilizing a conventional microphone array because internal noise sources are extremely close to the microphones. As internal noise is not always stationary, statistically independent or sparse, most useful blind source separation approaches, such as independent component analysis and the sparseness approach, cannot be employed. Our aim is to reduce internal noise utilizing microphones and piezoelectric devices attached to the internal noise source. In this paper, a general description of the acoustical array is formulated and the characteristic features of microphones and piezoelectric devices in an acoustical array are given. An acoustical array combining microphones and piezoelectric devices is also described with some experimental results.

  11. Comparison of binaural microphones for externalization of sounds

    DEFF Research Database (Denmark)

    Cubick, Jens; Sánchez Rodríguez, C.; Song, Wookeun

    2015-01-01

    or with microphones placed inside the ear canals of a person. In this study, binaural room impulse responses (BRIRs) were measured with several commercially available binaural microphones, both placed inside the listeners’ ears (individual BRIR) and on a head and torso simulator (generic BRIR). The degree...... of externalization of speech and noise stimuli was tested in a listening experiment with a multi-stimulus test. No influence was found for the stimulus signal, but the externalization scores were found to be lower for 0◦ incidence. With all microphones, relatively high externalization scores were achieved......, and for all but one microphone, individual BRIRs resulted in slightly better externalization than generic ones....

  12. Evaluation of Performance With an Adaptive Digital Remote Microphone System and a Digital Remote Microphone Audio-Streaming Accessory System.

    Science.gov (United States)

    Wolfe, Jace; Duke, Mila Morais; Schafer, Erin; Jones, Christine; Mülder, Hans E; John, Andrew; Hudson, Mary

    2015-09-01

    One purpose of this study was to evaluate the improvement in speech recognition obtained with use of 2 different remote microphone technologies. Another purpose of this study was to determine whether a battery of audiometric measures could predict benefit from use of these technologies. Sentence recognition was evaluated while 17 adults used each of 2 different hearing aids. Performance was evaluated with and without 2 different remote microphone systems. A variety of audiologic measures were administered to determine whether prefitting assessment may predict benefit from remote microphone technology. Use of both remote microphone systems resulted in improvement in speech recognition in quiet and in noise. There were no differences in performance obtained with the 2 different remote microphone technologies in quiet and at low competing noise levels, but use of the digital adaptive remote microphone system provided better speech recognition in the presence of moderate- to high-level noise. The Listening in Spatialized Noise–Sentence Test Prescribed Gain Amplifier (Cameron & Dillon, 2010) measure served as a good predictor of benefit from remote microphone technology. Each remote microphone system improved sentence recognition in noise, but greater improvement was obtained with the digital adaptive system. The Listening in Spatialized Noise–Sentence Test Prescribed Gain Amplifier may serve as a good indicator of benefit from remote microphone technology.

  13. A piezoelectric micro control valve with integrated capacitive sensing for ambulant blood pressure waveform monitoring

    NARCIS (Netherlands)

    Groen, Maarten; Wu, Kai; Brookhuis, Robert Anton; van Houwelingen, Marc J.; Brouwer, Dannis Michel; Lötters, Joost Conrad; Wiegerink, Remco J.

    2014-01-01

    We have designed and characterized a MEMS microvalve with built-in capacitive displacement sensing and fitted it with a miniature piezoelectric actuator to achieve active valve control. The integrated displacement sensor enables high bandwidth proportional control of the gas flow through the valve.

  14. Advantages of directional hearing aid microphones related to room acoustics

    NARCIS (Netherlands)

    Leeuw, A. R.; Dreschler, W. A.

    1991-01-01

    In this study, two types of hearing aids were used. Both aids had the same frequency characteristics for frontal sound, but one employed an omnidirectional microphone and the other a directional microphone. The frequency characteristics of both hearing aids were measured for five azimuths on KEMAR

  15. A microflown based sound presure microphone suitable for harsh environments

    NARCIS (Netherlands)

    Yntema, Doekle Reinder; de Bree, H.E.

    2005-01-01

    There are several cases where a sound field reconstruction or prediction is required under harsh conditions such as high temperature, humidity or chemical attack. A regular pressure microphone will not last long under these conditions. Electret based pressure microphones stop working well above 70

  16. Fabrication of silicon condenser microphones using single wafer technology

    NARCIS (Netherlands)

    Scheeper, P.R.; van der Donk, A.G.H.; Olthuis, Wouter; Bergveld, Piet

    1992-01-01

    A condenser microphone design that can be fabricated using the sacrificial layer technique is proposed and tested. The microphone backplate is a 1-¿m plasma-enhanced chemical-vapor-deposited (PECVD) silicon nitride film with a high density of acoustic holes (120-525 holes/mm2), covered with a thin

  17. Static pressure and temperature coefficients of working standard microphones

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Cutanda Henriquez, Vicente; Torras Rosell, Antoni

    2016-01-01

    The sensitivity of measurement microphones is affected by changes in the environmental conditions, mainly temperature and static pressure. This rate of change has been the object of previous studies focused on Laboratory Standard microphones. The literature describes frequency dependent values fo...

  18. The ribbon microphone - an educational aid: use of a ribbon microphone to teach multi-discipline computer simulation skills

    CSIR Research Space (South Africa)

    Van Wyk, Marius

    2016-07-01

    Full Text Available on Advances in Computational Tools for Engineering Applications (ACTEA), 13-15 July 2016, Libanon The ribbon microphone — An educational aid: Use of a ribbon microphone to teach multi-discipline computer simulation skills Marius van Wyk ; Petrie Meyer...

  19. Advanced Mechatronics and MEMS Devices

    CERN Document Server

    2013-01-01

    Advanced Mechatronics and MEMS Devicesdescribes state-of-the-art MEMS devices and introduces the latest technology in electrical and mechanical microsystems. The evolution of design in microfabrication, as well as emerging issues in nanomaterials, micromachining, micromanufacturing and microassembly are all discussed at length in this volume. Advanced Mechatronics also provides a reader with knowledge of MEMS sensors array, MEMS multidimensional accelerometer, artificial skin with imbedded tactile components, as well as other topics in MEMS sensors and transducers. The book also presents a number of topics in advanced robotics and an abundance of applications of MEMS in robotics, like reconfigurable modular snake robots, magnetic MEMS robots for drug delivery and flying robots with adjustable wings, to name a few. This book also: Covers the fundamentals of advanced mechatronics and MEMS devices while also presenting new state-of-the-art methodology and technology used in the application of these devices Prese...

  20. Capacitive chemical sensor

    Science.gov (United States)

    Manginell, Ronald P; Moorman, Matthew W; Wheeler, David R

    2014-05-27

    A microfabricated capacitive chemical sensor can be used as an autonomous chemical sensor or as an analyte-sensitive chemical preconcentrator in a larger microanalytical system. The capacitive chemical sensor detects changes in sensing film dielectric properties, such as the dielectric constant, conductivity, or dimensionality. These changes result from the interaction of a target analyte with the sensing film. This capability provides a low-power, self-heating chemical sensor suitable for remote and unattended sensing applications. The capacitive chemical sensor also enables a smart, analyte-sensitive chemical preconcentrator. After sorption of the sample by the sensing film, the film can be rapidly heated to release the sample for further analysis. Therefore, the capacitive chemical sensor can optimize the sample collection time prior to release to enable the rapid and accurate analysis of analytes by a microanalytical system.

  1. Virtual Microphones for Multichannel Audio Resynthesis

    Directory of Open Access Journals (Sweden)

    Athanasios Mouchtaris

    2003-09-01

    Full Text Available Multichannel audio offers significant advantages for music reproduction, including the ability to provide better localization and envelopment, as well as reduced imaging distortion. On the other hand, multichannel audio is a demanding media type in terms of transmission requirements. Often, bandwidth limitations prohibit transmission of multiple audio channels. In such cases, an alternative is to transmit only one or two reference channels and recreate the rest of the channels at the receiving end. Here, we propose a system capable of synthesizing the required signals from a smaller set of signals recorded in a particular venue. These synthesized “virtual” microphone signals can be used to produce multichannel recordings that accurately capture the acoustics of that venue. Applications of the proposed system include transmission of multichannel audio over the current Internet infrastructure and, as an extension of the methods proposed here, remastering existing monophonic and stereophonic recordings for multichannel rendering.

  2. Two-Microphone Separation of Speech Mixtures

    DEFF Research Database (Denmark)

    Pedersen, Michael Syskind; Wang, DeLiang; Larsen, Jan

    2008-01-01

    Separation of speech mixtures, often referred to as the cocktail party problem, has been studied for decades. In many source separation tasks, the separation method is limited by the assumption of at least as many sensors as sources. Further, many methods require that the number of signals within...... combined, independent component analysis (ICA) and binary time–frequency (T–F) masking. By estimating binary masks from the outputs of an ICA algorithm, it is possible in an iterative way to extract basis speech signals from a convolutive mixture. The basis signals are afterwards improved by grouping...... similar signals. Using two microphones, we can separate, in principle, an arbitrary number of mixed speech signals. We show separation results for mixtures with as many as seven speech signals under instantaneous conditions. We also show that the proposed method is applicable to segregate speech signals...

  3. Piezoelectric MEMS resonators

    CERN Document Server

    Piazza, Gianluca

    2017-01-01

    This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associate...

  4. EDITORIAL: International MEMS Conference 2006

    Science.gov (United States)

    Tay, Francis E. H.; Jianmin, Miao; Iliescu, Ciprian

    2006-04-01

    The International MEMS conference (iMEMS2006) organized by the Institute of Bioengineering and Nanotechnology and Nanyang Technological University aims to provide a platform for academicians, professionals and industrialists in various related fields from all over the world to share and learn from each other. Of great interest is the incorporation of the theme of life sciences application using MEMS. It is the desire of this conference to initiate collaboration and form network of cooperation. This has continued to be the objective of iMEMS since its inception in 1997. The technological advance of MEMS over the past few decades has been truly exciting in terms of development and applications. In order to participate in this rapid development, a conference involving delegates from within the MEMS community and outside the community is very meaningful and timely. With the receipt of over 200 articles, delegates related to MEMS field from all over the world will share their perspectives on topics such as MEMS/MST Design, MEMS Teaching and Education, MEMS/MST Packaging, MEMS/MST Fabrication, Microsystems Applications, System Integration, Wearable Devices, MEMSWear and BioMEMS. Invited speakers and delegates from outside the field have also been involved to provide challenges, especially in the life sciences field, for the MEMS community to potentially address. The proceedings of the conference will be published as an issue in the online Journal of Physics: Conference Series and this can reach a wider audience and will facilitate the reference and citation of the work presented in the conference. We wish to express our deep gratitude to the International Scientific Committee members and the organizing committee members for contributing to the success of this conference. We would like to thank all the delegates, speakers and sponsors from all over the world for presenting and sharing their perspectives on topics related to MEMS and the challenges that MEMS can

  5. SoundCompass: A Distributed MEMS Microphone Array-Based Sensor for Sound Source Localization

    OpenAIRE

    Tiete, Jelmer; Domínguez, Federico; da Silva, Bruno; Segers, Laurent; Steenhaut, Kris; Touhafi, Abdellah

    2014-01-01

    Sound source localization is a well-researched subject with applications ranging from localizing sniper fire in urban battlefields to cataloging wildlife in rural areas. One critical application is the localization of noise pollution sources in urban environments, due to an increasing body of evidence linking noise pollution to adverse effects on human health. Current noise mapping techniques often fail to accurately identify noise pollution sources, because they rely on the interpolation of ...

  6. Piezoelectric MEMS Microphones for Ground Testing of Aeronautical Systems, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — Improving the acoustical environment is critical in aeronautics. Airports and aeronautical systems manufacturers are facing ever-increasing demands to reduce noise...

  7. Piezoelectric MEMS Microphones for Ground Testing of Aeronautical Systems, Phase II

    Data.gov (United States)

    National Aeronautics and Space Administration — Improving the acoustical environment is critical in aeronautics. Airports and aeronautical systems manufacturers are facing ever-increasing demands to reduce noise...

  8. Low Actuating Voltage Spring-Free RF MEMS SPDT Switch

    Directory of Open Access Journals (Sweden)

    Deepak Bansal

    2016-01-01

    Full Text Available RF MEMS devices are known to be superior to their solid state counterparts in terms of power consumption and electromagnetic response. Major limitations of MEMS devices are their low switching speed, high actuation voltage, larger size, and reliability. In the present paper, a see-saw single pole double throw (SPDT RF MEMS switch based on anchor-free mechanism is proposed which eliminates the above-mentioned disadvantages. The proposed switch has a switching time of 394 nsec with actuation voltage of 5 V. Size of the SPDT switch is reduced by utilizing a single series capacitive switch compared to conventional switches with capacitive and series combinations. Reliability of the switch is improved by adding floating metal and reducing stiction between the actuating bridge and transmission line. Insertion loss and isolation are better than −0.6 dB and −20 dB, respectively, for 1 GHz to 20 GHz applications.

  9. An investigation of methods for free-field comparison calibration of measurement microphones

    DEFF Research Database (Denmark)

    Barrera-Figueroa, Salvador; Moreno Pescador, Guillermo; Jacobsen, Finn

    2010-01-01

    Free-field comparison calibration of measurement microphones requires that a calibrated reference microphone and a test microphone are exposed to the same sound pressure in a free field. The output voltages of the microphones can be measured either sequentially or simultaneously. The sequential m...

  10. Integrated design of MEMS

    DEFF Research Database (Denmark)

    De Grave, Arnaud; Brissaud, Daniel

    2007-01-01

    . Manufacturing is mainly coming from the silicon industry. Our interest is to highlight the differences between designing MEMS and designing classical ICs or mechanical devices, to propose new methods and aided-tools supporting the design process. Our methodology is based on an ethnographic approach through...

  11. Photonic MEMS switch applications

    Science.gov (United States)

    Husain, Anis

    2001-07-01

    As carriers and service providers continue their quest for profitable network solutions, they have shifted their focus from raw bandwidth to rapid provisioning, delivery and management of revenue generating services. Inherently transparent to data rate the transmission wavelength and data format, MEMS add scalability, reliability, low power and compact size providing flexible solutions to the management and/or fiber channels in long haul, metro, and access networks. MEMS based photonic switches have gone from the lab to commercial availability and are now currently in carrier trials and volume production. 2D MEMS switches offer low up-front deployment costs while remaining scalable to large arrays. They allow for transparent, native protocol transmission. 2D switches enable rapid service turn-up and management for many existing and emerging revenue rich services such as storage connectivity, optical Ethernet, wavelength leasing and optical VPN. As the network services evolve, the larger 3D MEMS switches, which provide greater scalability and flexibility, will become economically viable to serve the ever-increasing needs.

  12. Microelectromechanical Systems (MEMS)

    Indian Academy of Sciences (India)

    As a field, Microelectromechanical Systems (MEMS) has matured over the last two decades to have several scientific journals dedicated to it. These journals are instrumental in bringing out the interdisciplinary nature of research that the field demands. In the beginning, most papers were process centric where realization of ...

  13. MEMS Solar Generators

    OpenAIRE

    Grbovic, Dragoslav; Osswald, Sebastian

    2011-01-01

    Approved for public release; distribution is unlimited Using MEMS bimaterial structures to build highly efficient solar energy generators. This is a novel approach that utilizes developments in the area of bimaterial sensors and applies them in the field of solar energy harvesting.

  14. Modelling measurement microphones using BEM with visco-thermal losses

    DEFF Research Database (Denmark)

    Cutanda Henriquez, Vicente; Juhl, Peter Møller

    2012-01-01

    For many decades, models that can explain the behaviour of measurement condenser microphones have been proposed in the literature. These devices have an apparently simple working principle, a charged capacitor whose charge varies when one of its electrodes, the diaphragm, moves as a result of sound...... waves. However, measurement microphones must be manufactured very carefully due to their sensitivity to small changes of their physical parameters. There are different elements in a microphone, the diaphragm, the gap behind it, a back cavity, a vent for pressure equalization and an external medium. All...... visco-thermal losses is used to model measurement condenser microphones. The models presented are fully coupled and include a FEM model of the diaphragm. The behaviour of the acoustic variables in the gap and the effect of the pressure equalization vent are discussed, as well as the practical difficulty...

  15. Localization of sound sources in a room with one microphone

    Science.gov (United States)

    Peić Tukuljac, Helena; Lissek, Hervé; Vandergheynst, Pierre

    2017-08-01

    Estimation of the location of sound sources is usually done using microphone arrays. Such settings provide an environment where we know the difference between the received signals among different microphones in the terms of phase or attenuation, which enables localization of the sound sources. In our solution we exploit the properties of the room transfer function in order to localize a sound source inside a room with only one microphone. The shape of the room and the position of the microphone are assumed to be known. The design guidelines and limitations of the sensing matrix are given. Implementation is based on the sparsity in the terms of voxels in a room that are occupied by a source. What is especially interesting about our solution is that we provide localization of the sound sources not only in the horizontal plane, but in the terms of the 3D coordinates inside the room.

  16. Study on a flexoelectric microphone using barium strontium titanate

    International Nuclear Information System (INIS)

    Kwon, S R; Huang, W B; Yuan, F G; Jiang, X N; Zhang, S J

    2016-01-01

    In this study, a flexoelectric microphone was, for the first time, designed and fabricated in a bridge structure using barium strontium titanate (Ba 0.65 Sr 0.35 TiO 3 ) ceramic and tested afterwards. The prototyped flexoelectric microphone consists of a 1.5 mm  ×  768 μm  ×  50 μm BST bridge structure and a silicon substrate with a cavity. The sensitivity and resonance frequency were designed to be 0.92 pC/Pa and 98.67 kHz, respectively. The signal to noise ratio was measured to be 74 dB. The results demonstrate that the flexoelectric microphone possesses high sensitivity and a wide working frequency range simultaneously, suggesting that flexoelectricity could be an excellent alternative sensing mechanism for microphone applications. (paper)

  17. Study on a flexoelectric microphone using barium strontium titanate

    Science.gov (United States)

    Kwon, S. R.; Huang, W. B.; Zhang, S. J.; Yuan, F. G.; Jiang, X. N.

    2016-04-01

    In this study, a flexoelectric microphone was, for the first time, designed and fabricated in a bridge structure using barium strontium titanate (Ba0.65Sr0.35TiO3) ceramic and tested afterwards. The prototyped flexoelectric microphone consists of a 1.5 mm  ×  768 μm  ×  50 μm BST bridge structure and a silicon substrate with a cavity. The sensitivity and resonance frequency were designed to be 0.92 pC/Pa and 98.67 kHz, respectively. The signal to noise ratio was measured to be 74 dB. The results demonstrate that the flexoelectric microphone possesses high sensitivity and a wide working frequency range simultaneously, suggesting that flexoelectricity could be an excellent alternative sensing mechanism for microphone applications.

  18. Characterization of assembled MEMS

    Science.gov (United States)

    Jandric, Zoran; Randall, John N.; Saini, Rahul; Nolan, Michael; Skidmore, George

    2005-01-01

    Zyvex is developing a low-cost high-precision method for manufacturing MEMS-based three-dimensional structures/assemblies. The assembly process relies on compliant properties of the interconnecting components. The sockets and connectors are designed to benefit from their compliant nature by allowing the mechanical component to self-align, i.e. reposition themselves to their designed, stable position, independent of the initial placement of the part by the external robot. Thus, the self-aligning property guarantees the precision of the assembled structure to be very close to, or the same, as the precision of the lithography process itself. A three-dimensional (3D) structure is achieved by inserting the connectors into the sockets through the use of a passive end-effector. We have developed the automated, high-yield, assembly procedure which permits connectors to be picked up from any location within the same die, or a separate die. This general procedure allows for the possibility to assemble parts of dissimilar materials. We have built many 3D MEMS structures, including several 3D MEMS devices such as a scanning electron microscope (SEM) micro column, mass-spectrometer column, variable optical attenuator. For these 3D MEMS structures we characterize their mechanical strength through finite element simulation, dynamic properties by finite-element analysis and experimentally with UMECH"s MEMS motion analyzer (MMA), alignment accuracy by using an in-house developed dihedral angle measurement laser autocollimator, and impact properties by performing drop tests. The details of the experimental set-ups, the measurement procedures, and the experimental data are presented in this paper.

  19. European MEMS foundries

    Science.gov (United States)

    Salomon, Patric R.

    2003-01-01

    According to the latest release of the NEXUS market study, the market for MEMS or Microsystems Technology (MST) is predicted to grow to $68B by the year 2005, with systems containing these components generating even higher revenues and growth. The latest advances in MST/MEMS technology have enabled the design of a new generation of microsystems that are smaller, cheaper, more reliable, and consume less power. These integrated systems bring together numerous analog/mixed signal microelectronics blocks and MEMS functions on a single chip or on two or more chips assembled within an integrated package. In spite of all these advances in technology and manufacturing, a system manufacturer either faces a substantial up-front R&D investment to create his own infrastructure and expertise, or he can use design and foundry services to get the initial product into the marketplace fast and with an affordable investment. Once he has a viable product, he can still think about his own manufacturing efforts and investments to obtain an optimized high volume manufacturing for the specific product. One of the barriers to successful exploitation of MEMS/MST technology has been the lack of access to industrial foundries capable of producing certified microsystems devices in commercial quantities, including packaging and test. This paper discusses Multi-project wafer (MPW) runs, requirements for foundries and gives some examples of foundry business models. Furthermore, this paper will give an overview on MST/MEMS services that are available in Europe, including pure commercial activities, European project activities (e.g. Europractice), and some academic services.

  20. Analyzing acoustic phenomena with a smartphone microphone

    Science.gov (United States)

    Kuhn, Jochen; Vogt, Patrik

    2013-02-01

    This paper describes how different sound types can be explored using the microphone of a smartphone and a suitable app. Vibrating bodies, such as strings, membranes, or bars, generate air pressure fluctuations in their immediate vicinity, which propagate through the room in the form of sound waves. Depending on the triggering mechanism, it is possible to differentiate between four types of sound waves: tone, sound, noise, and bang. In everyday language, non-experts use the terms "tone" and "sound" synonymously; however, from a physics perspective there are very clear differences between the two terms. This paper presents experiments that enable learners to explore and understand these differences. Tuning forks and musical instruments (e.g., recorders and guitars) can be used as equipment for the experiments. The data are captured using a smartphone equipped with the appropriate app (in this paper we describe the app Audio Kit for iOS systems ). The values captured by the smartphone are displayed in a screen shot and then viewed directly on the smartphone or exported to a computer graphics program for printing.

  1. Acoustic Source Localization via Subspace Based Method Using Small Aperture MEMS Arrays

    Directory of Open Access Journals (Sweden)

    Xin Zhang

    2014-01-01

    Full Text Available Small aperture microphone arrays provide many advantages for portable devices and hearing aid equipment. In this paper, a subspace based localization method is proposed for acoustic source using small aperture arrays. The effects of array aperture on localization are analyzed by using array response (array manifold. Besides array aperture, the frequency of acoustic source and the variance of signal power are simulated to demonstrate how to optimize localization performance, which is carried out by introducing frequency error with the proposed method. The proposed method for 5 mm array aperture is validated by simulations and experiments with MEMS microphone arrays. Different types of acoustic sources can be localized with the highest precision of 6 degrees even in the presence of wind noise and other noises. Furthermore, the proposed method reduces the computational complexity compared with other methods.

  2. A versatile multi-user polyimide surface micromachinning process for MEMS applications

    KAUST Repository

    Carreno, Armando Arpys Arevalo

    2015-04-01

    This paper reports a versatile multi-user micro-fabrication process for MEMS devices, the \\'Polyimide MEMS Multi-User Process\\' (PiMMPs). The reported process uses polyimide as the structural material and three separate metallization layers that can be interconnected depending on the desired application. This process enables for the first time the development of out-of-plane compliant mechanisms that can be designed using six different physical principles for actuation and sensing on a wafer from a single fabrication run. These principles are electrostatic motion, thermal bimorph actuation, capacitive sensing, magnetic sensing, thermocouple-based sensing and radio frequency transmission and reception. © 2015 IEEE.

  3. Memória

    OpenAIRE

    Carlos Alberto Mourão Júnior; Nicole Costa Faria

    2015-01-01

    ResumoEste artigo tem como objetivo central apresentar os processos de memória de maneira didática, proporcionando aos alunos e futuros pesquisadores um primeiro contato satisfatório com o tema. Já há algum tempo, tem sido observada a ocorrência de confusões conceituais e metodológicas no campo da neurociência cognitiva, tanto em relação à memória quanto em relação às outras funções psicológicas básicas. Neste ensaio, alguns conceitos principais são esclarecidos. É apresentada uma classificaç...

  4. Introduction - MEMS Aerospace Applications

    Science.gov (United States)

    2004-02-01

    Advanced Materials and Fabrication Methods Commercial MEMS-based Products I-15 Digital Micromirrors for Sub-portable Projectors PLUS U3-880 • 2.9 lbs • 1.9...x 9” x 7” •SVGA (800 x 600) 10 um I-16 Digital Mirror Display (DMD) Texas Instruments, Inc. I-17 Micro flow-diffusion analysis system flow-diffusion

  5. Effects Of Environmental And Operational Stresses On RF MEMS Switch Technologies For Space Applications

    Science.gov (United States)

    Jah, Muzar; Simon, Eric; Sharma, Ashok

    2003-01-01

    Micro Electro Mechanical Systems (MEMS) have been heralded for their ability to provide tremendous advantages in electronic systems through increased electrical performance, reduced power consumption, and higher levels of device integration with a reduction of board real estate. RF MEMS switch technology offers advantages such as low insertion loss (0.1- 0.5 dB), wide bandwidth (1 GHz-100 GHz), and compatibility with many different process technologies (quartz, high resistivity Si, GaAs) which can replace the use of traditional electronic switches, such as GaAs FETS and PIN Diodes, in microwave systems for low signal power (x technologies, the unknown reliability, due to the lack of information concerning failure modes and mechanisms inherent to MEMS devices, create an obstacle to insertion of MEMS technology into high reliability applications. All MEMS devices are sensitive to moisture and contaminants, issues easily resolved by hermetic or near-hermetic packaging. Two well-known failure modes of RF MEMS switches are charging in the dielectric layer of capacitive membrane switches and contact interface stiction of metal-metal switches. Determining the integrity of MEMS devices when subjected to the shock, vibration, temperature extremes, and radiation of the space environment is necessary to facilitate integration into space systems. This paper will explore the effects of different environmental stresses, operational life cycling, temperature, mechanical shock, and vibration on the first commercially available RF MEMS switches to identify relevant failure modes and mechanisms inherent to these device and packaging schemes for space applications. This paper will also describe RF MEMS Switch technology under development at NASA GSFC.

  6. Capacitive skin characterization

    Science.gov (United States)

    McConnell, Robert; Manzo, Michael

    1992-10-01

    NASA is currently involved in research that utilizes a capacitive sensor that is used for proximity detection of objects. This sensor is sensitive to conductive and dielectric materials including metal objects and humans. The range of the sensor has been found to be about twelve inches. It is the goal of this research project to further characterize the sensor so that it can be tailored to specific requirements. The characterization of the sensor should be with respect to shield size, sensor size, object size, and object distance. The method of finite elements to calculate the capacitance of the sensor while varying different parameters was used. Each of the parameters was varied in turn, often by selecting data points from different runs. The plotted results are shown and an apparent functionality developed for each.

  7. Capacitive deionization of seawater

    Energy Technology Data Exchange (ETDEWEB)

    Farmer, J.C.; Fix, D.V.; Mack, G.V. [and others

    1995-10-01

    Capacitive deionization with carbon aerogel electrodes is an efficient and economical new process for removing salt and impurities from water. Carbon aerogel is a material that enables the successful purification of water because of its high surface area, optimum pore size, and low electrical resistivity. The electrodes are maintained at a potential difference of about one volt; ions are removed from the water by the imposed electrostatic field and retained on the electrode surface until the polarity is reversed. The capacitive deionization of water with a stack of carbon aerogel electrodes has been successfully demonstrated. The overall process offers advantages when compared to conventional water-purification methods, requiring neither pumps, membranes, distillation columns, nor thermal heaters. Consequently, the overall process is both robust and energy efficient. The current state of technology development, commercialization, and potential applications of this process are reviewed.

  8. Digital Capacitance Meter

    OpenAIRE

    Indra Budi Cahya Ardi; Luyung Dinaini Skom, MM

    2002-01-01

    This thesis explores the design, build, analyze the work circuit, and test a series ofDigital Capacitance Meter. It works by using two monostable multivibrator as shownon the input from the output through seven segment indicator. As the source voltageused 9-volt battery.This tool is used to determine condition and capacity of a capacitor in the variousunits, namely: Pikko farad (pF), nano-farad (nF), micro and milli farad farad (MF).

  9. Molecular Aspects of Capacitation

    Directory of Open Access Journals (Sweden)

    Gulfidan Zulfikaroglu

    2010-02-01

    Full Text Available Male and female gamets are derived from the primordial germ cells, which migrate from the wall of the yolk sac toward the developing gonads. Following a series of mitotic divisions these cells increase in number at the gonads. The primordial germ cells differentiate into spermatogonia and take the form of mature spermatozoa after spermotogensis and spermotogenesis at puberty. Capacitation is the reaction, which includes all of the molecular and physiological events of mature sperm to gain the ability of fertilizing oocytes at metaphase 2 in the female genital tract. Some molecular events significant in the initiation of capacitation have been identified as cholesterol efflux from the sperm plasma membrane, increased membrane fluidity, modulation of intracellular ion concentration, hyperpolarization of the sperm plasma membrane and increased protein tyrosine phosphorylation. During capacitation, the spermatozoa acquires the ability to penetrate the corona radiata and to bind to the zona pellucida. This binding triggers acrosome reaction which occurs by the development of multiple fenestrations between the outer acrosomal membrane and the plasma membrane of the spermatozoon. After the fusion of oocyte and sperm plasma membranes, sperm and oocyt pronuclei are joined together to compose the zygote. [Archives Medical Review Journal 2010; 19(1.000: 12-24

  10. Improved Open-Microphone Speech Recognition

    Science.gov (United States)

    Abrash, Victor

    2002-12-01

    Many current and future NASA missions make extreme demands on mission personnel both in terms of work load and in performing under difficult environmental conditions. In situations where hands are impeded or needed for other tasks, eyes are busy attending to the environment, or tasks are sufficiently complex that ease of use of the interface becomes critical, spoken natural language dialog systems offer unique input and output modalities that can improve efficiency and safety. They also offer new capabilities that would not otherwise be available. For example, many NASA applications require astronauts to use computers in micro-gravity or while wearing space suits. Under these circumstances, command and control systems that allow users to issue commands or enter data in hands-and eyes-busy situations become critical. Speech recognition technology designed for current commercial applications limits the performance of the open-ended state-of-the-art dialog systems being developed at NASA. For example, today's recognition systems typically listen to user input only during short segments of the dialog, and user input outside of these short time windows is lost. Mistakes detecting the start and end times of user utterances can lead to mistakes in the recognition output, and the dialog system as a whole has no way to recover from this, or any other, recognition error. Systems also often require the user to signal when that user is going to speak, which is impractical in a hands-free environment, or only allow a system-initiated dialog requiring the user to speak immediately following a system prompt. In this project, SRI has developed software to enable speech recognition in a hands-free, open-microphone environment, eliminating the need for a push-to-talk button or other signaling mechanism. The software continuously captures a user's speech and makes it available to one or more recognizers. By constantly monitoring and storing the audio stream, it provides the spoken

  11. Electromagnetic actuation in MEMS switches

    DEFF Research Database (Denmark)

    Oliveira Hansen, Roana Melina de; Mátéfi-Tempfli, Mária; Chemnitz, Steffen

    . Electromagnetic actuation is a very promising approach to operate such MEMS and Power MEMS devices, due to the long range, reproducible and strong forces generated by this method, among other advantages. However, the use of electromagnetic actuation in such devices requires the use of thick magnetic films, which...

  12. Topology optimized RF MEMS switches

    DEFF Research Database (Denmark)

    Philippine, M. A.; Zareie, H.; Sigmund, Ole

    2013-01-01

    Topology optimization is a rigorous and powerful method that should become a standard MEMS design tool - it can produce unique and non-intuitive designs that meet complex objectives and can dramatically improve the performance and reliability of MEMS devices. We present successful uses of topolog...

  13. Contact microphone using optical fibre Bragg grating technology

    International Nuclear Information System (INIS)

    Bezombes, F A; Lalor, M J; Burton, D R

    2007-01-01

    A contact microphone using optical fibre Bragg grating has been developed. It enables one to listen and record a human voice and/or breathing by monitoring the vibration generated by the outer wall of the throat during speech. This system can have many applications such as detecting defects in vocal folds, measuring and monitoring the vibration and defection generated by intubations of a patient throat and other voice related problem, low level speaking recording and transmitting is also possible, the microphone can be also used to monitor breathing and the system can be used as a microphone in very harsh environments for example it would allow one to hear the patient during a cat scan

  14. Metamorphic hemispherical microphone array for three-dimensional acoustics

    Science.gov (United States)

    Biswas, Shantonu; Reiprich, Johannes; Cohrs, Thaden; Stauden, Thomas; Pezoldt, Joerg; Jacobs, Heiko O.

    2017-07-01

    This article describes the realization of a metamorphic stretchable microphone array, which can be inflated by air to morph from a planar to a hemispherical shape. The array undergoes morphological changes to adjust their receive characteristic. To realize this device, a metamorphic printed circuit board technology (m-PCB) is described. The resulting products are millimeter-thin stretchable silicone embedded and electrically interconnected electronic structures with mechanical properties, which resemble a silicone membrane. The microphone array is used to localize a sound source in a 3D space. The results of the planar orientation (resting shape), and the 3D hemispherical orientation after air inflation are compared. The inflated hemispherical microphone array proofs to be better for 3D acoustic localization and/or beam-forming.

  15. Digital Cavity Resonance Monitor, alternative method of measuring cavity microphonics

    International Nuclear Information System (INIS)

    Tomasz Plawski; G. Davis; Hai Dong; J. Hovater; John Musson; Thomas Powers

    2005-01-01

    As is well known, mechanical vibration or microphonics in a cryomodule causes the cavity resonance frequency to change at the vibration frequency. One way to measure the cavity microphonics is to drive the cavity with a Phase Locked Loop. Measurement of the instantaneous frequency or PLL error signal provides information about the cavity microphonic frequencies. Although the PLL error signal is available directly, precision frequency measurements require additional instrumentation, a Cavity Resonance Monitor (CRM). The analog version of such a device has been successfully used for several cavity tests [1]. In this paper we present a prototype of a Digital Cavity Resonance Monitor designed and built in the last year. The hardware of this instrument consists of an RF downconverter, digital quadrature demodulator and digital processor motherboard (Altera FPGA). The motherboard processes received data and computes frequency changes with a resolution of 0.2 Hz, with a 3 kHz output bandwidth

  16. Design of robust differential microphone arrays with orthogonal polynomials.

    Science.gov (United States)

    Pan, Chao; Benesty, Jacob; Chen, Jingdong

    2015-08-01

    Differential microphone arrays have the potential to be widely deployed in hands-free communication systems thanks to their frequency-invariant beampatterns, high directivity factors, and small apertures. Traditionally, they are designed and implemented in a multistage way with uniform linear geometries. This paper presents an approach to the design of differential microphone arrays with orthogonal polynomials, more specifically with Jacobi polynomials. It first shows how to express the beampatterns as a function of orthogonal polynomials. Then several differential beamformers are derived and their performance depends on the parameters of the Jacobi polynomials. Simulations show the great flexibility of the proposed method in terms of designing any order differential microphone arrays with different beampatterns and controlling white noise gain.

  17. Square Diaphragm CMUT Capacitance Calculation Using a New Deflection Shape Function

    Directory of Open Access Journals (Sweden)

    Md Mosaddequr Rahman

    2011-01-01

    Full Text Available A new highly accurate closed-form capacitance calculation model has been developed to calculate the capacitance of capacitive micromachined ultrasonic transducers (CMUTs built with square diaphragms. The model has been developed by using a two-dimensional polynomial function that more accurately predicts the deflection curve of a square diaphragm deformed under the influence of a uniform external pressure and also takes account of the fringing field capacitances. The model has been verified by comparing the model-predicted deflection profiles and capacitance values with experimental results published elsewhere and finite element analysis (FEA carried out by the authors for different material properties, geometric specifications, and loading conditions. New model-calculated capacitance values are found to be in excellent agreement with published experimental results with a maximum deviation of 1.7%, and a maximum deviation of 1.5% has been observed when compared with FEA results. The model can help in improving the accuracy of the design methodology of CMUT devices and other MEMS-based capacitive type sensors built with square diaphragms.

  18. Static pressure and temperature coefficients of laboratory standard microphones

    DEFF Research Database (Denmark)

    Rasmussen, Knud

    1996-01-01

    The sensitivity of condenser measurement microphones depends on the environmental conditions due to the changes in the acoustic properties of the enclosed air between diaphragm and back-electrode and in the cavity behind the backelectrode. A theoretical investigation has been performed based...... on an extended lumped parameter representation of the mechanical and acoustical elements of the microphone, assuming the velocity distribution of the diaphragm to follow the zero-order Bessel function. The extension involves the frequency dependency of the dynamic diaphragm mass and stiffness as well as a first...

  19. The static pressure and temperature coefficients of laboratory standard microphones

    DEFF Research Database (Denmark)

    Rasmussen, Knud

    1999-01-01

    The sensitivity of condenser measurement microphones depends on the environmental conditions due to the changes in the acoustic properties of the air enclosed between diaphragm and backelectrode and in the cavity behind the backelectrode. A theoretical investigation has been performed based...... on an extended lumped parameter representation of the mechanical and acoustic elements of the microphone. The extension involves the frequency dependency of the dynamic diaphragm mass and stiffness as well as a first-order approximation of resonances in the back cavity. It was found that each coefficient...

  20. Acoustic Source Localization in Aircraft Interiors Using Microphone Array Technologies

    Science.gov (United States)

    Sklanka, Bernard J.; Tuss, Joel R.; Buehrle, Ralph D.; Klos, Jacob; Williams, Earl G.; Valdivia, Nicolas

    2006-01-01

    Using three microphone array configurations at two aircraft body stations on a Boeing 777-300ER flight test, the acoustic radiation characteristics of the sidewall and outboard floor system are investigated by experimental measurement. Analysis of the experimental data is performed using sound intensity calculations for closely spaced microphones, PATCH Inverse Boundary Element Nearfield Acoustic Holography, and Spherical Nearfield Acoustic Holography. Each method is compared assessing strengths and weaknesses, evaluating source identification capability for both broadband and narrowband sources, evaluating sources during transient and steady-state conditions, and quantifying field reconstruction continuity using multiple array positions.

  1. Chip-size-packaged silicon microphones [for hearing instruments

    DEFF Research Database (Denmark)

    Müllenborn, Matthias; Rombach, Pirmin; Klein, Udo

    2001-01-01

    The first results of silicon microphones that are completely batch-packaged and integrated with signal conditioning circuitry in a chip stack are discussed. The chip stack is designed to be directly mounted into a system, such as a hearing instrument, without further single-chip handling or wire...... consumption of about 50 μW in the near future, thereby living up to the tight specifications of microphones for hearing instruments. Other potential applications include mobile phones, headsets, and wearable computers, in which space is constrained....

  2. Influence of a remote microphone on localization with hearing aids

    DEFF Research Database (Denmark)

    Selby, Johan G.; Weisser, Adam; MacDonald, Ewen

    2017-01-01

    When used with hearing aids (HA), the addition of a remote microphone (RM) may alter the spatial perception of the listener. First, the RM signal is presented diotically from the HAs. Second, the processing in the HA often delays the RM signal relative to the HA microphone signals. Finally......, the level of the RM signal is independent of the distance from the RM to HA. The present study investigated localization performance of 15 normal-hearing and 9 hearing-impaired listeners under conditions simulating the use of an RM with a behind the ear (BTE) HA. Minimum audible angle discrimination around...

  3. Low Value Capacitance Measurement System with Adjustable Lead Capacitance Compensation

    OpenAIRE

    Gautam Sarkar; Anjan Rakshit; Amitava Chatterjee; Kesab Bhattacharya

    2013-01-01

    The present paper describes the development of a low cost, highly accurate low capacitance measurement system that can be used over a range of 0 – 400 pF with a resolution of 1 pF. The range of capacitance may be easily altered by a simple resistance or capacitance variation of the measurement circuit. This capacitance measurement system uses quad two-input NAND Schmitt trigger circuit CD4093B with hysteresis for the measurement and this system is integrated with PIC 18F2550 microcontroller f...

  4. Outlier Detection for Sensor Systems (ODSS): A MATLAB Macro for Evaluating Microphone Sensor Data Quality

    OpenAIRE

    Vasta, Robert; Crandell, Ian; Millican, Anthony; House, Leanna; Smith, Eric

    2017-01-01

    Microphone sensor systems provide information that may be used for a variety of applications. Such systems generate large amounts of data. One concern is with microphone failure and unusual values that may be generated as part of the information collection process. This paper describes methods and a MATLAB graphical interface that provides rapid evaluation of microphone performance and identifies irregularities. The approach and interface are described. An application to a microphone array us...

  5. Outlier Detection for Sensor Systems (ODSS): A MATLAB Macro for Evaluating Microphone Sensor Data Quality.

    Science.gov (United States)

    Vasta, Robert; Crandell, Ian; Millican, Anthony; House, Leanna; Smith, Eric

    2017-10-13

    Microphone sensor systems provide information that may be used for a variety of applications. Such systems generate large amounts of data. One concern is with microphone failure and unusual values that may be generated as part of the information collection process. This paper describes methods and a MATLAB graphical interface that provides rapid evaluation of microphone performance and identifies irregularities. The approach and interface are described. An application to a microphone array used in a wind tunnel is used to illustrate the methodology.

  6. Capacitance of circular patch resonator

    International Nuclear Information System (INIS)

    Miano, G.; Verolino, L.; Naples Univ.; Panariello, G.; Vaccaro, V.G.; Naples Univ.

    1995-11-01

    In this paper the capacitance of the circular microstrip patch resonator is computed. It is shown that the electrostatic problem can be formulated as a system of dual integral equations, and the most interesting techniques of solutions of these systems are reviewed. Some useful approximated formulas for the capacitance are derived and plots of the capacitance are finally given in a wide range of dielectric constants

  7. On experimental determination of the random-incidence response of microphones

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Rasmussen, Knud; Jacobsen, Finn

    2007-01-01

    The random-incidence sensitivity of a microphone is defined as the ratio of the output voltage to the sound pressure that would exist at the position of the acoustic center of the microphone in the absence of the microphone in a sound field with incident plane waves coming from all directions. Th...

  8. 78 FR 45272 - Certain Silicon Microphone Packages and Products Containing Same Institution of Investigation...

    Science.gov (United States)

    2013-07-26

    ... COMMISSION Certain Silicon Microphone Packages and Products Containing Same Institution of Investigation... importation, and the sale within the United States after importation of certain silicon microphone packages... importation, or the sale within the United States after importation of certain silicon microphone packages and...

  9. 76 FR 78042 - Certain Silicon Microphone Packages and Products Containing Same Receipt of Complaint...

    Science.gov (United States)

    2011-12-15

    ... COMMISSION Certain Silicon Microphone Packages and Products Containing Same Receipt of Complaint... complaint entitled In Re Certain Silicon Microphone Packages and Products Containing Same, DN 2864; the... importation of certain silicon microphone packages and products containing same. The complaint names Analog...

  10. 77 FR 2087 - Certain Silicon Microphone Packages and Products Containing Same; Institution of Investigation

    Science.gov (United States)

    2012-01-13

    ... COMMISSION Certain Silicon Microphone Packages and Products Containing Same; Institution of Investigation... importation, and the sale within the United States after importation of certain silicon microphone packages... after importation of certain silicon microphone packages and products containing same that infringe one...

  11. Resonant Magnetic Field Sensors Based On MEMS Technology

    Directory of Open Access Journals (Sweden)

    Elías Manjarrez

    2009-09-01

    Full Text Available Microelectromechanical systems (MEMS technology allows the integration of magnetic field sensors with electronic components, which presents important advantages such as small size, light weight, minimum power consumption, low cost, better sensitivity and high resolution. We present a discussion and review of resonant magnetic field sensors based on MEMS technology. In practice, these sensors exploit the Lorentz force in order to detect external magnetic fields through the displacement of resonant structures, which are measured with optical, capacitive, and piezoresistive sensing techniques. From these, the optical sensing presents immunity to electromagnetic interference (EMI and reduces the read-out electronic complexity. Moreover, piezoresistive sensing requires an easy fabrication process as well as a standard packaging. A description of the operation mechanisms, advantages and drawbacks of each sensor is considered. MEMS magnetic field sensors are a potential alternative for numerous applications, including the automotive industry, military, medical, telecommunications, oceanographic, spatial, and environment science. In addition, future markets will need the development of several sensors on a single chip for measuring different parameters such as the magnetic field, pressure, temperature and acceleration.

  12. Resonant Magnetic Field Sensors Based On MEMS Technology

    Science.gov (United States)

    Herrera-May, Agustín L.; Aguilera-Cortés, Luz A.; García-Ramírez, Pedro J.; Manjarrez, Elías

    2009-01-01

    Microelectromechanical systems (MEMS) technology allows the integration of magnetic field sensors with electronic components, which presents important advantages such as small size, light weight, minimum power consumption, low cost, better sensitivity and high resolution. We present a discussion and review of resonant magnetic field sensors based on MEMS technology. In practice, these sensors exploit the Lorentz force in order to detect external magnetic fields through the displacement of resonant structures, which are measured with optical, capacitive, and piezoresistive sensing techniques. From these, the optical sensing presents immunity to electromagnetic interference (EMI) and reduces the read-out electronic complexity. Moreover, piezoresistive sensing requires an easy fabrication process as well as a standard packaging. A description of the operation mechanisms, advantages and drawbacks of each sensor is considered. MEMS magnetic field sensors are a potential alternative for numerous applications, including the automotive industry, military, medical, telecommunications, oceanographic, spatial, and environment science. In addition, future markets will need the development of several sensors on a single chip for measuring different parameters such as the magnetic field, pressure, temperature and acceleration. PMID:22408480

  13. Resonant Magnetic Field Sensors Based On MEMS Technology.

    Science.gov (United States)

    Herrera-May, Agustín L; Aguilera-Cortés, Luz A; García-Ramírez, Pedro J; Manjarrez, Elías

    2009-01-01

    Microelectromechanical systems (MEMS) technology allows the integration of magnetic field sensors with electronic components, which presents important advantages such as small size, light weight, minimum power consumption, low cost, better sensitivity and high resolution. We present a discussion and review of resonant magnetic field sensors based on MEMS technology. In practice, these sensors exploit the Lorentz force in order to detect external magnetic fields through the displacement of resonant structures, which are measured with optical, capacitive, and piezoresistive sensing techniques. From these, the optical sensing presents immunity to electromagnetic interference (EMI) and reduces the read-out electronic complexity. Moreover, piezoresistive sensing requires an easy fabrication process as well as a standard packaging. A description of the operation mechanisms, advantages and drawbacks of each sensor is considered. MEMS magnetic field sensors are a potential alternative for numerous applications, including the automotive industry, military, medical, telecommunications, oceanographic, spatial, and environment science. In addition, future markets will need the development of several sensors on a single chip for measuring different parameters such as the magnetic field, pressure, temperature and acceleration.

  14. Measurement of Gravitational Acceleration Using a Computer Microphone Port

    Science.gov (United States)

    Khairurrijal; Eko Widiatmoko; Srigutomo, Wahyu; Kurniasih, Neny

    2012-01-01

    A method has been developed to measure the swing period of a simple pendulum automatically. The pendulum position is converted into a signal frequency by employing a simple electronic circuit that detects the intensity of infrared light reflected by the pendulum. The signal produced by the electronic circuit is sent to the microphone port and…

  15. Free-field calibration of measurement microphones at high frequencies

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Rasmussen, Knud; Torras Rosell, Antoni

    2011-01-01

    Measurement microphones are typically calibrated in a free field at frequencies up to 50 kHz. This is a sufficiently high frequency for the most of sound measurement applications related with noise assessment. However, other applications such as assessment of the noise emitted by ultrasound clean...

  16. Reproducibility of Dual-Microphone Voice Range Profile Equipment

    Science.gov (United States)

    Printz, Trine; Pedersen, Ellen Raben; Juhl, Peter; Nielsen, Troels; Grøntved, Ågot Møller; Godballe, Christian

    2017-01-01

    Purpose: The aim of this study was to add further knowledge about the usefulness of the Voice Range Profile (VRP) assessment in clinical settings and research by analyzing VRP dual-microphone equipment precision, reliability, and room effect. Method: Test-retest studies were conducted in an anechoic chamber and an office: (a) comparing sound…

  17. Design and analysis of diaphragms in dynamic microphones

    Directory of Open Access Journals (Sweden)

    Zi-Gui Huang

    2015-07-01

    Full Text Available Most contemporary high-end microphones are dynamic microphones, adopting the most basic electromagnetic transduction principles. This study investigated the diaphragm structures of dynamic microphones. The diaphragms were composed of polyimide material, and the boundary settings required for actual operation were provided using finite element model analysis software. The characteristic frequencies caused by grooving variations on the three-dimensional diaphragm were analyzed for the various groove shapes and number. The groove angles and width variations were examined based on the optimal groove shape selected in the aforementioned analysis, and the effects of these shapes were determined based on the analytical results. Acoustic waves cause thin films to vibrate, forming the working principle behind dynamic microphones. The thin film drives a coil to vibrate in a magnetic field and cuts the line of magnetic force, subsequently producing a voltage on both ends of the coil. This audio-frequency-inducted voltage represents an acoustic wave message. The finite element model analysis software was used to conduct electromagnetic induction simulations; the sound source was fed to the diaphragm to drive the coil. The coil vibrations caused the line of magnetic force to be cut, and the final voltages produced were examined and compared.

  18. Remote Microphone System Use at Home: Impact on Caregiver Talk

    Science.gov (United States)

    Benítez-Barrera, Carlos R.; Angley, Gina P.; Tharpe, Anne Marie

    2018-01-01

    Purpose: The purpose of this study was to investigate the effects of home use of a remote microphone system (RMS) on the spoken language production of caregivers with young children who have hearing loss. Method: Language Environment Analysis recorders were used with 10 families during 2 consecutive weekends (RMS weekend and No-RMS weekend). The…

  19. Development of PVF2 Noise-Cancelling Microphone

    Science.gov (United States)

    1979-03-01

    the United States it Is produced under the trade name KYNAR by Pennwalt Corporation, Philadelphia, PA. An important producer in Japan is Kureha ...subsidiary of Kureha Chemical Industry Co., Ltd. )I **Data from Gulton Industries, Irp. 4 2.0 PERFORMANCE OF THE PVF 2 MICROPHONE 2.1 POWER SUPPLY

  20. MP.EXE Microphone pressure sensitivity calibration calculation program

    DEFF Research Database (Denmark)

    Rasmussen, Knud

    1999-01-01

    MP.EXE is a program which calculates the pressure sensitivity of LS1 microphones as defined in IEC 61094-1, based on measurement results performed as laid down in IEC 61094-2.A very early program was developed and written by K. Rasmussen. The code of the present heavily extended version is written...

  1. Chip-size-packaged silicon microphones [for hearing instruments

    DEFF Research Database (Denmark)

    Müllenborn, Matthias; Rombach, Pirmin; Klein, Udo

    2001-01-01

    bonding. The devices are fully encapsulated and provided with a well-determined interface to the environment. The integrated microphones operate at a bias of 1.5 V and are expected to reach a sensitivity of 5 mV/Pa, an A-weighted equivalent input noise of 24 dB sound pressure level, and a power...

  2. Near field acoustic holography with microphones on a rigid sphere

    DEFF Research Database (Denmark)

    Jacobsen, Finn; Moreno-Pescador, Guillermo; Fernandez Grande, Efren

    2011-01-01

    Spherical near field acoustic holography (spherical NAH) is a technique that makes it possible to reconstruct the sound field inside and just outside a spherical surface on which the sound pressure is measured with an array of microphones. This is potentially very useful for source identification...

  3. Wake Vortex Detection: Phased Microphone vs. Linear Infrasonic Array

    Science.gov (United States)

    Shams, Qamar A.; Zuckerwar, Allan J.; Sullivan, Nicholas T.; Knight, Howard K.

    2014-01-01

    Sensor technologies can make a significant impact on the detection of aircraft-generated vortices in an air space of interest, typically in the approach or departure corridor. Current state-of-the art sensor technologies do not provide three-dimensional measurements needed for an operational system or even for wake vortex modeling to advance the understanding of vortex behavior. Most wake vortex sensor systems used today have been developed only for research applications and lack the reliability needed for continuous operation. The main challenges for the development of an operational sensor system are reliability, all-weather operation, and spatial coverage. Such a sensor has been sought for a period of last forty years. Acoustic sensors were first proposed and tested by National Oceanic and Atmospheric Administration (NOAA) early in 1970s for tracking wake vortices but these acoustic sensors suffered from high levels of ambient noise. Over a period of the last fifteen years, there has been renewed interest in studying noise generated by aircraft wake vortices, both numerically and experimentally. The German Aerospace Center (DLR) was the first to propose the application of a phased microphone array for the investigation of the noise sources of wake vortices. The concept was first demonstrated at Berlins Airport Schoenefeld in 2000. A second test was conducted in Tarbes, France, in 2002, where phased microphone arrays were applied to study the wake vortex noise of an Airbus 340. Similarly, microphone phased arrays and other opto-acoustic microphones were evaluated in a field test at the Denver International Airport in 2003. For the Tarbes and Denver tests, the wake trajectories of phased microphone arrays and lidar were compared as these were installed side by side. Due to a built-in pressure equalization vent these microphones were not suitable for capturing acoustic noise below 20 Hz. Our group at NASA Langley Research Center developed and installed an

  4. A novel capacitive micro-accelerometer with grid strip capacitances and sensing gap alterable capacitances

    International Nuclear Information System (INIS)

    Dong Linxi; Chen Jindan; Huo Weihong; Li Yongjie; Sun Lingling; Yan Haixia

    2009-01-01

    The comb capacitances fabricated by deep reactive ion etching (RIE) process have high aspect ratio which is usually smaller than 30: 1 for the complicated process factors, and the combs are usually not parallel due to the well-known micro-loading effect and other process factors, which restricts the increase of the seismic mass by increasing the thickness of comb to reduce the thermal mechanical noise and the decrease of the gap of the comb capacitances for increasing the sensitive capacitance to reduce the electrical noise. Aiming at the disadvantage of the deep RIE, a novel capacitive micro-accelerometer with grid strip capacitances and sensing gap alterable capacitances is developed. One part of sensing of inertial signal of the micro-accelerometer is by the grid strip capacitances whose overlapping area is variable and which do not have the non-parallel plate's effect caused by the deep RIE process. Another part is by the sensing gap alterable capacitances whose gap between combs can be reduced by the actuators. The designed initial gap of the alterable comb capacitances is relatively large to depress the effect of the maximum aspect ratio (30 : 1) of deep RIE process. The initial gap of the capacitance of the actuator is smaller than the one of the comb capacitances. The difference between the two gaps is the initial gap of the sensitive capacitor. The designed structure depresses greatly the requirement of deep RIE process. The effects of non-parallel combs on the accelerometer are also analyzed. The characteristics of the micro-accelerometer are discussed by field emission microscopy (FEM) tool ANSYS. The tested devices based on slide-film damping effect are fabricated, and the tested quality factor is 514, which shows that grid strip capacitance design can partly improve the resolution and also prove the feasibility of the designed silicon-glass anodically bonding process.

  5. Feasible pickup from intact ossicular chain with floating piezoelectric microphone

    Directory of Open Access Journals (Sweden)

    Kang Hou-Yong

    2012-02-01

    Full Text Available Abstract Objectives Many microphones have been developed to meet with the implantable requirement of totally implantable cochlear implant (TICI. However, a biocompatible one without destroying the intactness of the ossicular chain still remains under investigation. Such an implantable floating piezoelectric microphone (FPM has been manufactured and shows an efficient electroacoustic performance in vitro test at our lab. We examined whether it pick up sensitively from the intact ossicular chain and postulated whether it be an optimal implantable one. Methods Animal controlled experiment: five adult cats (eight ears were sacrificed as the model to test the electroacoustic performance of the FPM. Three groups were studied: (1 the experiment group (on malleus: the FPM glued onto the handle of the malleus of the intact ossicular chains; (2 negative control group (in vivo: the FPM only hung into the tympanic cavity; (3 positive control group (Hy-M30: a HiFi commercial microphone placed close to the site of the experiment ear. The testing speaker played pure tones orderly ranged from 0.25 to 8.0 kHz. The FPM inside the ear and the HiFi microphone simultaneously picked up acoustic vibration which recorded as .wav files to analyze. Results The FPM transformed acoustic vibration sensitively and flatly as did the in vitro test across the frequencies above 2.0 kHz, whereas inefficiently below 1.0 kHz for its overloading mass. Although the HiFi microphone presented more efficiently than the FPM did, there was no significant difference at 3.0 kHz and 8.0 kHz. Conclusions It is feasible to develop such an implantable FPM for future TICIs and TIHAs system on condition that the improvement of Micro Electromechanical System and piezoelectric ceramic material technology would be applied to reduce its weight and minimize its size.

  6. Ovenized microelectromechanical system (MEMS) resonator

    Science.gov (United States)

    Olsson, Roy H; Wojciechowski, Kenneth; Kim, Bongsang

    2014-03-11

    An ovenized micro-electro-mechanical system (MEMS) resonator including: a substantially thermally isolated mechanical resonator cavity; a mechanical oscillator coupled to the mechanical resonator cavity; and a heating element formed on the mechanical resonator cavity.

  7. Optically transduced MEMS magnetometer

    Science.gov (United States)

    Nielson, Gregory N; Langlois, Eric

    2014-03-18

    MEMS magnetometers with optically transduced resonator displacement are described herein. Improved sensitivity, crosstalk reduction, and extended dynamic range may be achieved with devices including a deflectable resonator suspended from the support, a first grating extending from the support and disposed over the resonator, a pair of drive electrodes to drive an alternating current through the resonator, and a second grating in the resonator overlapping the first grating to form a multi-layer grating having apertures that vary dimensionally in response to deflection occurring as the resonator mechanically resonates in a plane parallel to the first grating in the presence of a magnetic field as a function of the Lorentz force resulting from the alternating current. A plurality of such multi-layer gratings may be disposed across a length of the resonator to provide greater dynamic range and/or accommodate fabrication tolerances.

  8. MEMS digital parametric loudspeaker

    KAUST Repository

    Carreno, Armando Arpys Arevalo

    2016-03-23

    This paper reports on the design and fabrication of MEMS actuator arrays suitable for Digital Sound reconstruction and Parametric Directional Loudspeakers. Two distinct versions of the device were fabricated: one using the electrostatic principle actuation and the other one, the piezoelectric principle. Both versions used similar membrane dimensions, with a diameter of 500 μm. These devices are the smallest Micro-Machined Ultrasound Transducer (MUT) arrays that can be operated for both modes: Digital Sound Reconstruction and Parametric Loudspeaker. The chips consist of an array with 256 transducers, in a footprint of 12 mm by 12 mm. The total single chip size is: 2.3 cm by 2.3 cm, including the contact pads. © 2016 IEEE.

  9. Efficiency of Capacitively Loaded Converters

    DEFF Research Database (Denmark)

    Andersen, Thomas; Huang, Lina; Andersen, Michael A. E.

    2012-01-01

    is introduced as a definition of efficiency. The calculated and measured efficiency curves for charging DEAP actuator, polypropylene film capacitor and X7R MLCC are provided and compared. The attention has to be paid for the voltage dependent capacitive load, like X7R MLCC, when evaluating the charging......This paper explores the characteristic of capacitance versus voltage for dielectric electro active polymer (DEAP) actuator, 2kV polypropylene film capacitor as well as 3kV X7R multi layer ceramic capacitor (MLCC) at the beginning. An energy efficiency for capacitively loaded converters...... polypropylene film capacitor can be the equivalent capacitive load. Because of the voltage dependent characteristic, X7R MLCC cannot be used to replace the DEAP actuator. However, this type of capacitor can be used to substitute the capacitive actuator with voltage dependent property at the development phase....

  10. Effects of Radiation on MEMS

    OpenAIRE

    Shea, Herbert

    2011-01-01

    The sensitivity of MEMS devices to radiation is reviewed, with an emphasis on radiation levels representative of space missions. While silicon and metals generally do not show mechanical degradation at the radiation levels encountered in most missions, MEMS devices have been reported to fail at doses of as few krad, corresponding to less than one year in most orbits. Radiation sensitivity is linked primarily to the impact on device operation of radiation-induced trapped charge in dielectrics...

  11. Characterization of MEMS FTIR spectrometer

    Science.gov (United States)

    Khalil, Diaa; Sabry, Yasser; Omran, Haitham; Medhat, Mostafa; Hafez, Amr; Saadany, Bassam

    2011-03-01

    In this work we present the full characterization of an optical MEMS Fourier Transform Infra Red FTIR spectrometer fabricated by Deep Reactive Ion Etching DRIE Technology on Silicon substrate. Both electrical and optical properties of the spectrometer are measured. The presented techniques allows to build an engineering model for the spectrometer and to predict its main specifications taking into account the specificity of the MEMS technology used in the spectrometer fabrication.

  12. MEMS for automotive and aerospace applications

    CERN Document Server

    Kraft, Michael

    2013-01-01

    MEMS for automotive and aerospace applications reviews the use of Micro-Electro-Mechanical-Systems (MEMS) in developing solutions to the unique challenges presented by the automotive and aerospace industries.Part one explores MEMS for a variety of automotive applications. The role of MEMS in passenger safety and comfort, sensors for automotive vehicle stability control applications and automotive tire pressure monitoring systems are considered, along with pressure and flow sensors for engine management, and RF MEMS for automotive radar sensors. Part two then goes on to explore MEMS for

  13. Simulation of a low frequency Z-axis SU-8 accelerometer in coventorware and MEMS+

    KAUST Repository

    Carreno, Armando Arpys Arevalo

    2013-04-01

    This paper presents the simulation of a z-axis SU-8 capacitive accelerometer. The study consists of a modal analysis of the modeled accelerometer, a study relating capacitance to acceleration, capacitance to deflection, an effective spring constant calculation, and a comparison of results achieved using CoventorWare® ANALYZER™ and MEMS+®. A fabricated energy harvester design from [1] was used for modeling and simulation in this study, with a four spring attachment of a 650μm×650μm; ×110μm proof mass of 4.542×10-8 kg. At rest, the spacing between electrodes is 4μm along the z-axis, and at 1.5g acceleration, there is 1.9μm spacing between electrodes, at which point pull in occurs for a 1V voltage. © 2013 IEEE.

  14. Theory and applications of spherical microphone array processing

    CERN Document Server

    Jarrett, Daniel P; Naylor, Patrick A

    2017-01-01

    This book presents the signal processing algorithms that have been developed to process the signals acquired by a spherical microphone array. Spherical microphone arrays can be used to capture the sound field in three dimensions and have received significant interest from researchers and audio engineers. Algorithms for spherical array processing are different to corresponding algorithms already known in the literature of linear and planar arrays because the spherical geometry can be exploited to great beneficial effect. The authors aim to advance the field of spherical array processing by helping those new to the field to study it efficiently and from a single source, as well as by offering a way for more experienced researchers and engineers to consolidate their understanding, adding either or both of breadth and depth. The level of the presentation corresponds to graduate studies at MSc and PhD level. This book begins with a presentation of some of the essential mathematical and physical theory relevant to ...

  15. Reconstruction of sound fields with a spherical microphone array

    DEFF Research Database (Denmark)

    Fernandez Grande, Efren; Walton, Tim

    2014-01-01

    Spherical microphone arrays are very well suited for sound field measurements in enclosures or interior spaces, and generally in acoustic environments where sound waves impinge on the array from multiple directions. Because of their directional properties, they make it possible to resolve sound...... waves traveling in any direction. In particular, rigid sphere microphone arrays are robust, and have the favorable property that the scattering introduced by the array can be compensated for - making the array virtually transparent. This study examines a recently proposed sound field reconstruction...... method based on a point source expansion, i.e. equivalent source method, using a rigid spherical array. The study examines the capability of the method to distinguish between sound waves arriving from different directions (i.e., as a sound field separation method). This is representative of the potential...

  16. Piezoelectric MEMS: Ferroelectric thin films for MEMS applications

    Science.gov (United States)

    Kanno, Isaku

    2018-04-01

    In recent years, piezoelectric microelectromechanical systems (MEMS) have attracted attention as next-generation functional microdevices. Typical applications of piezoelectric MEMS are micropumps for inkjet heads or micro-gyrosensors, which are composed of piezoelectric Pb(Zr,Ti)O3 (PZT) thin films and have already been commercialized. In addition, piezoelectric vibration energy harvesters (PVEHs), which are regarded as one of the key devices for Internet of Things (IoT)-related technologies, are promising future applications of piezoelectric MEMS. Significant features of piezoelectric MEMS are their simple structure and high energy conversion efficiency between mechanical and electrical domains even on the microscale. The device performance strongly depends on the function of the piezoelectric thin films, especially on their transverse piezoelectric properties, indicating that the deposition of high-quality piezoelectric thin films is a crucial technology for piezoelectric MEMS. On the other hand, although the difficulty in measuring the precise piezoelectric coefficients of thin films is a serious obstacle in the research and development of piezoelectric thin films, a simple unimorph cantilever measurement method has been proposed to obtain precise values of the direct or converse transverse piezoelectric coefficient of thin films, and recently this method has become to be the standardized testing method. In this article, I will introduce fundamental technologies of piezoelectric thin films and related microdevices, especially focusing on the deposition of PZT thin films and evaluation methods for their transverse piezoelectric properties.

  17. The Capacitive Magnetic Field Sensor

    Science.gov (United States)

    Zyatkov, D. O.; Yurchenko, A. V.; Balashov, V. B.; Yurchenko, V. I.

    2016-01-01

    The results of a study of sensitive element magnetic field sensor are represented in this paper. The sensor is based on the change of the capacitance with an active dielectric (ferrofluid) due to the magnitude of magnetic field. To prepare the ferrofluid magnetic particles are used, which have a followingdispersion equal to 50 brand 5BDSR. The dependence of the sensitivity of the capacitive element from the ferrofluid with different dispersion of magnetic particles is considered. The threshold of sensitivity and sensitivity of a measuring cell with ferrofluid by a magnetic field was determined. The experimental graphs of capacitance change of the magnitude of magnetic field are presented.

  18. Microphones and Knock Sensors for Feedback Control of HCCI Engines

    OpenAIRE

    Souder, Jason S; Mack, John Hunter; Hedrick, J. Karl; Dibble, Robert W

    2004-01-01

    Homogeneous charge compression ignition (HCCI) engines lack direct in-cylinder mechanisms, such as spark plugs or direct fuel injection, for controlling the combustion timing. Many indirect methods have been used to control the combustion timing in an HCCI engine. With any indirect method, it is important to have a measure of the combustion timing so the control inputs can be adjusted for the next cycle. In this paper, it is shown that microphones and knock sensors can be used to detect combu...

  19. Micromechanical microphone using sideband modulation of nonlinear resonators

    Science.gov (United States)

    Boales, Joseph A.; Mateen, Farrukh; Mohanty, Pritiraj

    2017-08-01

    We report successful detection of an audio signal via sideband modulation of a nonlinear piezoelectric micromechanical resonator. The 270 × 96-μm resonator was shown to be reliable in audio detection for sound intensity levels as low as ambient room noise and to have an unamplified sensitivity of 23.9 μV/Pa. Such an approach may be adapted in acoustic sensors and microphones for consumer electronics or medical equipment such as hearing aids.

  20. Factors affecting the performance of large-aperture microphone arrays

    Science.gov (United States)

    Silverman, Harvey F.; Patterson, William R.; Sachar, Joshua

    2002-05-01

    Large arrays of microphones have been proposed and studied as a possible means of acquiring data in offices, conference rooms, and auditoria without requiring close-talking microphones. When such an array essentially surrounds all possible sources, it is said to have a large aperture. Large-aperture arrays have attractive properties of spatial resolution and signal-to-noise enhancement. This paper presents a careful comparison of theoretical and measured performance for an array of 256 microphones using simple delay-and-sum beamforming. This is the largest currently functional, all digital-signal-processing array that we know of. The array is wall-mounted in the moderately adverse environment of a general-purpose laboratory (8 m×8 m×3 m). The room has a T60 reverberation time of 550 ms. Reverberation effects in this room severely impact the array's performance. However, the width of the main lobe remains comparable to that of a simplified prediction. Broadband spatial resolution shows a single central peak with 10 dB gain about 0.4 m in diameter at the -3 dB level. Away from that peak, the response is approximately flat over most of the room. Optimal weighting for signal-to-noise enhancement degrades the spatial resolution minimally. Experimentally, we verify that signal-to-noise gain is less than proportional to the square root of the number of microphones probably due to the partial correlation of the noise between channels, to variation of signal intensity with polar angle about the source, and to imperfect correlation of the signal over the array caused by reverberations. We show measurements of the relative importance of each effect in our environment.

  1. CMOS MEMS Fabrication Technologies and Devices

    Directory of Open Access Journals (Sweden)

    Hongwei Qu

    2016-01-01

    Full Text Available This paper reviews CMOS (complementary metal-oxide-semiconductor MEMS (micro-electro-mechanical systems fabrication technologies and enabled micro devices of various sensors and actuators. The technologies are classified based on the sequence of the fabrication of CMOS circuitry and MEMS elements, while SOI (silicon-on-insulator CMOS MEMS are introduced separately. Introduction of associated devices follows the description of the respective CMOS MEMS technologies. Due to the vast array of CMOS MEMS devices, this review focuses only on the most typical MEMS sensors and actuators including pressure sensors, inertial sensors, frequency reference devices and actuators utilizing different physics effects and the fabrication processes introduced. Moreover, the incorporation of MEMS and CMOS is limited to monolithic integration, meaning wafer-bonding-based stacking and other integration approaches, despite their advantages, are excluded from the discussion. Both competitive industrial products and state-of-the-art research results on CMOS MEMS are covered.

  2. Conceptual MEMS Devices for a Redeployable Antenna

    National Research Council Canada - National Science Library

    Miller, Virginia

    2007-01-01

    Micro-Electro-Mechanical Systems (MEMS) are becoming an integral part of our lives through a wide range of applications, including MEMS accelerators for air bag deployment in vehicles, micromirrors in projection devices, and various...

  3. Noise Reduction with Microphone Arrays for Speaker Identification

    Energy Technology Data Exchange (ETDEWEB)

    Cohen, Z

    2011-12-22

    Reducing acoustic noise in audio recordings is an ongoing problem that plagues many applications. This noise is hard to reduce because of interfering sources and non-stationary behavior of the overall background noise. Many single channel noise reduction algorithms exist but are limited in that the more the noise is reduced; the more the signal of interest is distorted due to the fact that the signal and noise overlap in frequency. Specifically acoustic background noise causes problems in the area of speaker identification. Recording a speaker in the presence of acoustic noise ultimately limits the performance and confidence of speaker identification algorithms. In situations where it is impossible to control the environment where the speech sample is taken, noise reduction filtering algorithms need to be developed to clean the recorded speech of background noise. Because single channel noise reduction algorithms would distort the speech signal, the overall challenge of this project was to see if spatial information provided by microphone arrays could be exploited to aid in speaker identification. The goals are: (1) Test the feasibility of using microphone arrays to reduce background noise in speech recordings; (2) Characterize and compare different multichannel noise reduction algorithms; (3) Provide recommendations for using these multichannel algorithms; and (4) Ultimately answer the question - Can the use of microphone arrays aid in speaker identification?

  4. Microphone variability and degradation: implications for monitoring programs employing autonomous recording units

    Directory of Open Access Journals (Sweden)

    Patrick J. Turgeon

    2017-06-01

    Full Text Available Autonomous recording units (ARUs are emerging as an effective tool for avian population monitoring and research. Although ARU technology is being rapidly adopted, there is a need to establish whether variation in ARU components and their degradation with use might introduce detection biases that would affect long-term monitoring and research projects. We assessed whether microphone sensitivity impacted the probability of detecting bird vocalizations by broadcasting a sequence of 12 calls toward an array of commercially available ARUs equipped with microphones of varying sensitivities under three levels (32 dBA, 42 dBA, and 50 dBA of experimentally induced noise conditions selected to reflect the range of noise levels commonly encountered during avian surveys. We used binomial regression to examine factors influencing probability of detection for each species and used these to examine the impact of microphone sensitivity on the effective detection area (ha for each species. Microphone sensitivity loss reduced detection probability for all species examined, but the magnitude of the effect varied between species and often interacted with distance. Microphone sensitivity loss reduced the effective detection area by an average of 25% for microphones just beyond manufacturer specifications (-5 dBV and by an average of 66% for severely compromised microphones (-20 dBV. Microphone sensitivity loss appeared to be more problematic for low frequency calls where reduction in the effective detection area occurred most rapidly. Microphone degradation poses a source of variation in avian surveys made with ARUs that will require regular measurement of microphone sensitivity and criteria for microphone replacement to ensure scientifically reproducible results. We recommend that research and monitoring projects employing ARUs test their microphones regularly, replace microphones with declining sensitivity, and record sensitivity as a potential covariate in

  5. Capacitive deionization system

    Energy Technology Data Exchange (ETDEWEB)

    Richardson, J. H., LLNL

    1996-10-01

    The new capacitive deionization system (CDI) removes ions, contaminants impurities from water and other aqueous process streams, and further selectively places the removed ions back into solution during regeneration. It provides a separation process that does not utilize chemical regeneration processes, and thus significantly reduces or completely eliminates secondary wastes associated with the operation of ion exchange resins. In the CDI, electrolyte flows in open channels formed between adjacent electrodes, and consequently the pressure drop is much lower than conventional separation processes. The fluid flow can be gravity fed through these open channels, and does not require membranes. This feature represents a significant advantage over the conventional reverse osmosis systems which include water permeable cellulose acetate membranes, and over the electrodialysis systems which require expensive and exotic ion exchange membranes. The CDI is adaptable for use in a wide variety of commercial applications, including domestic water softening, industrial water softening, waste water purification, sea water desalination, treatment of nuclear and aqueous wastes, treatment of boiler water in nuclear and fossil power plants, production of high-purity water for semiconductor processing, and removal of salt from water for agricultural irrigation. CDI accomplishes this removal of impurities by a variety of mechanisms, but predominantly by electrostatic removal of organic and inorganic ions from water or any other dielectric solvent.

  6. Microelectromechanical (MEM) thermal actuator

    Science.gov (United States)

    Garcia, Ernest J [Albuquerque, NM; Fulcher, Clay W. G. [Sandia Park, NM

    2012-07-31

    Microelectromechanical (MEM) buckling beam thermal actuators are disclosed wherein the buckling direction of a beam is constrained to a desired direction of actuation, which can be in-plane or out-of-plane with respect to a support substrate. The actuators comprise as-fabricated, linear beams of uniform cross section supported above the substrate by supports which rigidly attach a beam to the substrate. The beams can be heated by methods including the passage of an electrical current through them. The buckling direction of an initially straight beam upon heating and expansion is controlled by incorporating one or more directional constraints attached to the substrate and proximal to the mid-point of the beam. In the event that the beam initially buckles in an undesired direction, deformation of the beam induced by contact with a directional constraint generates an opposing force to re-direct the buckling beam into the desired direction. The displacement and force generated by the movement of the buckling beam can be harnessed to perform useful work, such as closing contacts in an electrical switch.

  7. Modeling nonlinearities in MEMS oscillators.

    Science.gov (United States)

    Agrawal, Deepak K; Woodhouse, Jim; Seshia, Ashwin A

    2013-08-01

    We present a mathematical model of a microelectromechanical system (MEMS) oscillator that integrates the nonlinearities of the MEMS resonator and the oscillator circuitry in a single numerical modeling environment. This is achieved by transforming the conventional nonlinear mechanical model into the electrical domain while simultaneously considering the prominent nonlinearities of the resonator. The proposed nonlinear electrical model is validated by comparing the simulated amplitude-frequency response with measurements on an open-loop electrically addressed flexural silicon MEMS resonator driven to large motional amplitudes. Next, the essential nonlinearities in the oscillator circuit are investigated and a mathematical model of a MEMS oscillator is proposed that integrates the nonlinearities of the resonator. The concept is illustrated for MEMS transimpedance-amplifier- based square-wave and sine-wave oscillators. Closed-form expressions of steady-state output power and output frequency are derived for both oscillator models and compared with experimental and simulation results, with a good match in the predicted trends in all three cases.

  8. Structured synthesis of MEMS using evolutionary approaches

    DEFF Research Database (Denmark)

    Fan, Zhun; Wang, Jiachuan; Achiche, Sofiane

    2008-01-01

    In this paper, we discuss the hierarchy that is involved in a typical MEMS design and how evolutionary approaches can be used to automate the hierarchical synthesis process for MEMS. The paper first introduces the flow of a structured MEMS design process and emphasizes that system-level lumped...... the integrated design automation idea using these evolutionary approaches....

  9. Electrostatic MEMS devices with high reliability

    Science.gov (United States)

    Goldsmith, Charles L; Auciello, Orlando H; Sumant, Anirudha V; Mancini, Derrick C; Gudeman, Chris; Sampath, Suresh; Carlilse, John A; Carpick, Robert W; Hwang, James

    2015-02-24

    The present invention provides for an electrostatic microelectromechanical (MEMS) device comprising a dielectric layer separating a first conductor and a second conductor. The first conductor is moveable towards the second conductor, when a voltage is applied to the MEMS device. The dielectric layer recovers from dielectric charging failure almost immediately upon removal of the voltage from the MEMS device.

  10. A six degrees of freedom mems manipulator

    NARCIS (Netherlands)

    de Jong, B.R.

    2006-01-01

    This thesis reports about a six degrees of freedom (DOF) precision manipulator in MEMS, concerning concept generation for the manipulator followed by design and fabrication (of parts) of the proposed manipulation concept in MEMS. Researching the abilities of 6 DOF precision manipulation in MEMS is

  11. Ferroelectric Negative Capacitance Domain Dynamics

    OpenAIRE

    Hoffmann, Michael; Khan, Asif Islam; Serrao, Claudy; Lu, Zhongyuan; Salahuddin, Sayeef; Pešić, Milan; Slesazeck, Stefan; Schroeder, Uwe; Mikolajick, Thomas

    2017-01-01

    Transient negative capacitance effects in epitaxial ferroelectric Pb(Zr$_{0.2}$Ti$_{0.8}$)O$_3$ capacitors are investigated with a focus on the dynamical switching behavior governed by domain nucleation and growth. Voltage pulses are applied to a series connection of the ferroelectric capacitor and a resistor to directly measure the ferroelectric negative capacitance during switching. A time-dependent Ginzburg-Landau approach is used to investigate the underlying domain dynamics. The transien...

  12. Modeling and simulation of Capacitive Micromachined Ultrasonic Transducer (CMUT)

    Energy Technology Data Exchange (ETDEWEB)

    Anbalagan, S A [Department of Instrumentation and Control Engineering, National Institute of Technology, Tiruchirappalli-620015 (India); Uma, G [Department of Instrumentation and Control Engineering, National Institute of Technology, Tiruchirappalli-620015 (India); Umapathy, M [Department of Instrumentation and Control Engineering, National Institute of Technology, Tiruchirappalli-620015 (India)

    2006-04-01

    This work presents the modeling and analysis of CMUT using the MEMS simulation software, Coventorware. A rectangular membrane CMUT of area 40{mu}m X 20{mu}m with 0.2{mu}m thickness of silicon nitride as the movable membrane was designed. To reduce the parasitic capacitance, silicon substrate with gold was used as the fixed bottom electrode, and the combination of aluminium and chromium were used as top electrode. The simulations were performed using Finite Element Modeling techniques. The various parameters greatly affecting the performance of CMUT such as resonant frequency, which decides the proper operation of CMUT as a transmitter or receiver and collapse voltage, the maximum voltage which the device can withstand are analyzed. It was also observed that the resonant frequency of the device decreases as the applied bias voltage increases. The changes were found due to the interesting effect known as electrostatic spring softening.

  13. Modeling and simulation of Capacitive Micromachined Ultrasonic Transducer (CMUT)

    Science.gov (United States)

    Anbalagan, S. A.; Uma, G.; Umapathy, M.

    2006-04-01

    This work presents the modeling and analysis of CMUT using the MEMS simulation software, Coventorware. A rectangular membrane CMUT of area 40µm X 20µm with 0.2µm thickness of silicon nitride as the movable membrane was designed. To reduce the parasitic capacitance, silicon substrate with gold was used as the fixed bottom electrode, and the combination of aluminium and chromium were used as top electrode. The simulations were performed using Finite Element Modeling techniques. The various parameters greatly affecting the performance of CMUT such as resonant frequency, which decides the proper operation of CMUT as a transmitter or receiver and collapse voltage, the maximum voltage which the device can withstand are analyzed. It was also observed that the resonant frequency of the device decreases as the applied bias voltage increases. The changes were found due to the interesting effect known as electrostatic spring softening.

  14. Modeling and simulation of Capacitive Micromachined Ultrasonic Transducer (CMUT)

    International Nuclear Information System (INIS)

    Anbalagan, S A; Uma, G; Umapathy, M

    2006-01-01

    This work presents the modeling and analysis of CMUT using the MEMS simulation software, Coventorware. A rectangular membrane CMUT of area 40μm X 20μm with 0.2μm thickness of silicon nitride as the movable membrane was designed. To reduce the parasitic capacitance, silicon substrate with gold was used as the fixed bottom electrode, and the combination of aluminium and chromium were used as top electrode. The simulations were performed using Finite Element Modeling techniques. The various parameters greatly affecting the performance of CMUT such as resonant frequency, which decides the proper operation of CMUT as a transmitter or receiver and collapse voltage, the maximum voltage which the device can withstand are analyzed. It was also observed that the resonant frequency of the device decreases as the applied bias voltage increases. The changes were found due to the interesting effect known as electrostatic spring softening

  15. Robust Speaker Recognition with Combined Use of Acoustic and Throat Microphone Speech

    DEFF Research Database (Denmark)

    Sahidullah, Md; Gonzalez Hautamäki, Rosa; Thomsen, Dennis Alexander Lehmann

    2016-01-01

    Accuracy of automatic speaker recognition (ASV) systems degrades severely in the presence of background noise. In this paper, we study the use of additional side information provided by a body-conducted sensor, throat microphone. Throat microphone signal is much less affected by background noise...... in comparison to acoustic microphone signal. This makes throat microphones potentially useful for feature extraction or speech activity detection. This paper, firstly, proposes a new prototype system for simultaneous data-acquisition of acoustic and throat microphone signals. Secondly, we study the use...... of this additional information for both speech activity detection, feature extraction and fusion of the acoustic and throat microphone signals. We collect a pilot database consisting of 38 subjects including both clean and noisy sessions. We carry out speaker verification experiments using Gaussian mixture model...

  16. An underestimated issue: unsuspected decrease of sound processor microphone sensitivity, technical, and clinical evaluation.

    Science.gov (United States)

    Razza, Sergio; Burdo, Sandro

    2011-05-01

    To describe the rate of occurrence of unsuspected decrease in sensitivity of the sound processor microphone and to evaluate its effect on the patient's audiological performance in terms of reduction in speech recognition scores. Speech processor microphones were tested by connecting the speech processor acoustic monitor circuit to a hearing aid analyzer. The response curves were compared with those obtained from fully working microphones. During a 6-month investigation period, microphone response curves were measured from a group of cochlear implant recipients who had not reported any problems. Despite the absence of any subjective problem, some microphones were found to show a loss of sensitivity. Their users, aged between 4 and 67 years, were tested both with the defective and a working microphone in order to calculate the correlation between the degree of microphone failure and the decline in audiological performance. To quantify the effect of microphone failure, patients' speech recognition skills were measured by live voice connected discourse tracking series administered in different conditions and by recorded sentences lists. A total of 120 apparently fully functioning sound processors were tested in the investigation: 33 (27.5%) were affected by a subjectively unreported sensitivity decrease. Speech-tracking scores correlated significantly with the loss of microphone sensitivity in all test conditions (r = 0.69-0.77, P processor microphone sensitivity causes a degree of hearing decline that negatively affects the cochlear recipient's clinical performance. Microphone faults are often unreported events, and their occurrence rate is underestimated. To establish that the microphone is providing correct input to the speech processor a standard control procedure, including technical and clinical checks, is needed in clinical practice.

  17. Singulation for imaging ring arrays of capacitive micromachined ultrasonic transducers

    International Nuclear Information System (INIS)

    Chang, Chienliu; Moini, Azadeh; Nikoozadeh, Amin; Sarioglu, Ali Fatih; Apte, Nikhil; Zhuang, Xuefeng; Khuri-Yakub, Butrus T

    2014-01-01

    Singulation of MEMS is a critical step in the transition from wafer-level to die-level devices. As is the case for capacitive micromachined ultrasound transducer (CMUT) ring arrays, an ideal singulation must protect the fragile membranes from the processing environment while maintaining a ring array geometry. The singulation process presented in this paper involves bonding a trench-patterned CMUT wafer onto a support wafer, deep reactive ion etching (DRIE) of the trenches, separating the CMUT wafer from the support wafer and de-tethering the CMUT device from the CMUT wafer. The CMUT arrays fabricated and singulated in this process were ring-shaped arrays, with inner and outer diameters of 5 mm and 10 mm, respectively. The fabricated CMUT ring arrays demonstrate the ability of this method to successfully and safely singulate the ring arrays and is applicable to any arbitrary 2D shaped MEMS device with uspended microstructures, taking advantage of the inherent planar attributes of DRIE. (technical note)

  18. Singulation for imaging ring arrays of capacitive micromachined ultrasonic transducers

    Science.gov (United States)

    Chang, Chienliu; Moini, Azadeh; Nikoozadeh, Amin; Sarioglu, Ali Fatih; Apte, Nikhil; Zhuang, Xuefeng; Khuri-Yakub, Butrus T.

    2014-10-01

    Singulation of MEMS is a critical step in the transition from wafer-level to die-level devices. As is the case for capacitive micromachined ultrasound transducer (CMUT) ring arrays, an ideal singulation must protect the fragile membranes from the processing environment while maintaining a ring array geometry. The singulation process presented in this paper involves bonding a trench-patterned CMUT wafer onto a support wafer, deep reactive ion etching (DRIE) of the trenches, separating the CMUT wafer from the support wafer and de-tethering the CMUT device from the CMUT wafer. The CMUT arrays fabricated and singulated in this process were ring-shaped arrays, with inner and outer diameters of 5 mm and 10 mm, respectively. The fabricated CMUT ring arrays demonstrate the ability of this method to successfully and safely singulate the ring arrays and is applicable to any arbitrary 2D shaped MEMS device with uspended microstructures, taking advantage of the inherent planar attributes of DRIE.

  19. MEMS linear and nonlinear statics and dynamics

    CERN Document Server

    Younis, Mohammad I

    2011-01-01

    MEMS Linear and Nonlinear Statics and Dynamics presents the necessary analytical and computational tools for MEMS designers to model and simulate most known MEMS devices, structures, and phenomena. This book also provides an in-depth analysis and treatment of the most common static and dynamic phenomena in MEMS that are encountered by engineers. Coverage also includes nonlinear modeling approaches to modeling various MEMS phenomena of a nonlinear nature, such as those due to electrostatic forces, squeeze-film damping, and large deflection of structures. The book also: Includes examples of nume

  20. Large area MEMS based ultrasound device for cancer detection

    International Nuclear Information System (INIS)

    Wodnicki, Robert; Thomenius, Kai; Ming Hooi, Fong; Sinha, Sumedha P.; Carson, Paul L.; Lin Dersong; Zhuang Xuefeng; Khuri-Yakub, Pierre; Woychik, Charles

    2011-01-01

    We present image results obtained using a prototype ultrasound array that demonstrates the fundamental architecture for a large area MEMS based ultrasound device for detection of breast cancer. The prototype array consists of a tiling of capacitive Micromachined Ultrasound Transducers (cMUTs) that have been flip-chip attached to a rigid organic substrate. The pitch on the cMUT elements is 185 μm and the operating frequency is nominally 9 MHz. The spatial resolution of the new probe is comparable to those of production PZT probes; however the sensitivity is reduced by conditions that should be correctable. Simulated opposed-view image registration and Speed of Sound volume reconstruction results for ultrasound in the mammographic geometry are also presented.

  1. Large area MEMS based ultrasound device for cancer detection

    Science.gov (United States)

    Wodnicki, Robert; Thomenius, Kai; Ming Hooi, Fong; Sinha, Sumedha P.; Carson, Paul L.; Lin, Der-Song; Zhuang, Xuefeng; Khuri-Yakub, Pierre; Woychik, Charles

    2011-08-01

    We present image results obtained using a prototype ultrasound array that demonstrates the fundamental architecture for a large area MEMS based ultrasound device for detection of breast cancer. The prototype array consists of a tiling of capacitive Micromachined Ultrasound Transducers (cMUTs) that have been flip-chip attached to a rigid organic substrate. The pitch on the cMUT elements is 185 μm and the operating frequency is nominally 9 MHz. The spatial resolution of the new probe is comparable to those of production PZT probes; however the sensitivity is reduced by conditions that should be correctable. Simulated opposed-view image registration and Speed of Sound volume reconstruction results for ultrasound in the mammographic geometry are also presented.

  2. Large area MEMS based ultrasound device for cancer detection

    Energy Technology Data Exchange (ETDEWEB)

    Wodnicki, Robert, E-mail: wodnicki@research.ge.com [GE Global Research, 1 Research Circle, Niskayuna, NY 12309 (United States); Thomenius, Kai [GE Global Research, 1 Research Circle, Niskayuna, NY 12309 (United States); Ming Hooi, Fong; Sinha, Sumedha P.; Carson, Paul L. [Radiology and Biomedical Engineering, University of Michigan, Ann Arbor, MI 48109 (United States); Lin Dersong; Zhuang Xuefeng; Khuri-Yakub, Pierre [Department of Electrical Engineering, Stanford University, Stanford, CA 94309 (United States); Woychik, Charles [GE Global Research, 1 Research Circle, Niskayuna, NY 12309 (United States)

    2011-08-21

    We present image results obtained using a prototype ultrasound array that demonstrates the fundamental architecture for a large area MEMS based ultrasound device for detection of breast cancer. The prototype array consists of a tiling of capacitive Micromachined Ultrasound Transducers (cMUTs) that have been flip-chip attached to a rigid organic substrate. The pitch on the cMUT elements is 185 {mu}m and the operating frequency is nominally 9 MHz. The spatial resolution of the new probe is comparable to those of production PZT probes; however the sensitivity is reduced by conditions that should be correctable. Simulated opposed-view image registration and Speed of Sound volume reconstruction results for ultrasound in the mammographic geometry are also presented.

  3. Polyimide and Metals MEMS Multi-User Processes

    KAUST Repository

    Arevalo, Arpys

    2016-11-01

    The development of a polyimide and metals multi-user surface micro-machining process for Micro-electro-mechanical Systems (MEMS) is presented. The process was designed to be as general as possible, and designed to be capable to fabricate different designs on a single silicon wafer. The process was not optimized with the purpose of fabricating any one specific device but can be tweaked to satisfy individual needs depending on the application. The fabrication process uses Polyimide as the structural material and three separated metallization layers that can be interconnected depending on the desired application. The technology allows the development of out-of-plane compliant mechanisms, which can be combined with six variations of different physical principles for actuation and sensing on a single processed silicon wafer. These variations are: electrostatic motion, thermal bimorph actuation, capacitive sensing, magnetic sensing, thermocouple-based sensing and radio frequency transmission and reception.

  4. Of light, of MEMS: Optical MEMS in telecommunications and beyond

    Indian Academy of Sciences (India)

    Abstract. The burst of the Internet bubble in 2000 has severely quenched the pace of development in the optical MEMS field. However, it is now clear that this field is again set to move forward as not only telecommunication but many other industries are benefiting from its application. We describe in this paper some of.

  5. High Channel Count, High Density Microphone Arrays for Wind Tunnel Environments, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — The Interdisciplinary Consulting Corporation (IC2) proposes the development of high channel count, high density, reduced cost per channel, directional microphone...

  6. Outlier Detection for Sensor Systems (ODSS: A MATLAB Macro for Evaluating Microphone Sensor Data Quality

    Directory of Open Access Journals (Sweden)

    Robert Vasta

    2017-10-01

    Full Text Available Microphone sensor systems provide information that may be used for a variety of applications. Such systems generate large amounts of data. One concern is with microphone failure and unusual values that may be generated as part of the information collection process. This paper describes methods and a MATLAB graphical interface that provides rapid evaluation of microphone performance and identifies irregularities. The approach and interface are described. An application to a microphone array used in a wind tunnel is used to illustrate the methodology.

  7. Novel Capacitive Sensing System Design of a Microelectromechanical Systems Accelerometer for Gravity Measurement Applications

    Directory of Open Access Journals (Sweden)

    Zhu Li

    2016-09-01

    Full Text Available This paper presents an in-plane sandwich nano-g microelectromechanical systems (MEMS accelerometer. The proof-mass fabrication is based on silicon etching through technology using inductive coupled plasma (ICP etching. The capacitive detection system, which employs the area-changing sensing method, combines elementary capacitive pickup electrodes with periodic-sensing-array transducers. In order to achieve a large dynamic range with an ultrahigh resolution, the capacitive detection system employs two periodic-sensing-array transducers. Each of them can provide numbers for the signal period in the entire operating range. The suspended proof-mass is encapsulated between two glass caps, which results in a three dimensional structure. The measured resonant frequency and quality factor (Q are 13.2 Hz and 47, respectively. The calibration response of a ±0.7 g input acceleration is presented, and the accelerometer system presents a sensitivity of 122 V/g and a noise floor of 30 ng/√Hz (at 1 Hz, and 1 atm. The bias stability for a period of 10 h is 30 μg. The device has endured a shock up to ±2.6 g, and the full scale output appears to be approximately ±1.4 g presently. This work presents a new opportunity for highly sensitive MEMS fabrication to enable future high-precision measurement applications, such as for gravity measurements.

  8. Two-layer radio frequency MEMS fractal capacitors in PolyMUMPS for S-band applications

    KAUST Repository

    Elshurafa, Amro M.

    2012-07-23

    In this Letter, the authors fabricate for the first time MEMS fractal capacitors possessing two layers and compare their performance characteristics with the conventional parallel-plate capacitor and previously reported state-of-the-art single-layer MEMS fractal capacitors. Explicitly, a capacitor with a woven structure and another with an interleaved configuration were fabricated in the standard PolyMUMPS surface micromachining process and tested at S-band frequencies. The self-resonant frequencies of the fabricated capacitors were close to 10GHz, which is better than that of the parallel-plate capacitor, which measured only 5.5GHz. Further, the presented capacitors provided a higher capacitance when compared with the state-of-the-art-reported MEMS fractal capacitors created using a single layer at the expense of a lower quality factor. © 2012 The Institution of Engineering and Technology.

  9. Design and Fabrication of a Slanted-Beam MEMS Accelerometer

    Directory of Open Access Journals (Sweden)

    Wei Xu

    2017-03-01

    Full Text Available This paper presents a novel capacitive microelectromechanical systems (MEMS accelerometer with slanted supporting beams and all-silicon sandwich structure. Its sensing mechanism is quite similar to an ordinary sandwich-type MEMS accelerometer, except that its proof mass is suspended by a beam parallel to the {111} plane of a (100 silicon wafer. In this way, each sensing element can detect accelerations in two orthogonal directions. Four of these sensing elements could work together and constitute a 3-axis micro-accelerometer by using a simple planar assembly process. This design avoids the traditional 3-axis accelerometer’ disadvantage of possible placement inaccuracy when assembling on three different planes and largely reduces the package volume. The slanted-beam accelerometer’s performance was modeled and analyzed by using both analytical calculations and finite element method (FEM simulations. A prototype of one sensing element was fabricated and tested. Measured results show that this accelerometer has a good bias stability 76.8 ppm (1σ, tested immediately after power on, two directional sensitivities (sensitivity angle α = 45.4° and low nonlinearity (<0.5% over a sensing range up to ±50 g, which demonstrates a great opportunity for future high-precision three-axis inertial measurement.

  10. Llamas: Large-area microphone arrays and sensing systems

    Science.gov (United States)

    Sanz-Robinson, Josue

    Large-area electronics (LAE) provides a platform to build sensing systems, based on distributing large numbers of densely spaced sensors over a physically-expansive space. Due to their flexible, "wallpaper-like" form factor, these systems can be seamlessly deployed in everyday spaces. They go beyond just supplying sensor readings, but rather they aim to transform the wealth of data from these sensors into actionable inferences about our physical environment. This requires vertically integrated systems that span the entirety of the signal processing chain, including transducers and devices, circuits, and signal processing algorithms. To this end we develop hybrid LAE / CMOS systems, which exploit the complementary strengths of LAE, enabling spatially distributed sensors, and CMOS ICs, providing computational capacity for signal processing. To explore the development of hybrid sensing systems, based on vertical integration across the signal processing chain, we focus on two main drivers: (1) thin-film diodes, and (2) microphone arrays for blind source separation: 1) Thin-film diodes are a key building block for many applications, such as RFID tags or power transfer over non-contact inductive links, which require rectifiers for AC-to-DC conversion. We developed hybrid amorphous / nanocrystalline silicon diodes, which are fabricated at low temperatures (<200 °C) to be compatible with processing on plastic, and have high current densities (5 A/cm2 at 1 V) and high frequency operation (cutoff frequency of 110 MHz). 2) We designed a system for separating the voices of multiple simultaneous speakers, which can ultimately be fed to a voice-command recognition engine for controlling electronic systems. On a device level, we developed flexible PVDF microphones, which were used to create a large-area microphone array. On a circuit level we developed localized a-Si TFT amplifiers, and a custom CMOS IC, for system control, sensor readout and digitization. On a signal processing

  11. Patch holography using a double layer microphone array

    DEFF Research Database (Denmark)

    Gomes, Jesper Skovhus

    a closed local element mesh that surrounds the microphone array, and with a part of the mesh coinciding with a patch, the entire source is not needed in the model. Since the array has two layers, sources/reflections behind the array are also allowed. The Equivalent Source Method (ESM) is another technique...... in which the sound field is represented by a set of monopoles placed inside the source. In this paper these monopoles are distributed so that they surround the array, and the reconstruction is compared with the IBEM-based approach. The comparisons are based on computer simulations with a planar double...... layer array and sources with different shapes....

  12. Modeling of rf MEMS switches

    Science.gov (United States)

    Robertson, Barbara; Ho, Fat D.; Hudson, Tracy D.

    2001-10-01

    The microelectromechanical system (MEMS) switch offers many benefits in radio frequency (RF) applications. These benefits include low insertion loss, high quality factor (Q), low power, RF isolation, and low cost. The ability to manufacture mechanical switches on a chip with electronics can lead to higher functionality, such as single-chip arrays, and smart switches. The MEMS switch is also used as a building block in devices such as phase shifters, filters, and switchable antenna elements. The MEMS designer needs models of these basic elements in order to incorporate them into their applications. The objective of this effort is to develop lumped element models for MEMS RF switches, which are incorporated into a CAD software. Tanner Research Inc.'s Electronic Design Automation (EDA) software is being used to develop a suite of mixed-signal RF switch models. The suite will include switches made from cantilever beams and fixed-fixed beams. The switches may be actuated by electrostatic, piezoelectric or electromagnetic forces. The effort presented in this paper concentrates on switches actuated by electrostatic forces. The lumped element models use a current-force electrical-mechanical analogy. Finite element modeling and device testing will be used to verify the Tanner models. The effects of materials, geometries, temperature, fringing fields, and mounting geometries are considered.

  13. MEMS AO for Planet Finding

    Science.gov (United States)

    Rao, Shanti; Wallace, J. Kent; Shao, Mike; Schmidtlin, Edouard; Levine, B. Martin; Samuele, Rocco; Lane, Benjamin; Chakrabarti, Supriya; Cook, Timothy; Hicks, Brian; hide

    2008-01-01

    This slide presentation reviews a method for planet finding using microelectromechanical systems (MEMS) Adaptive Optics (AO). The use of a deformable mirror (DM) is described as a part of the instrument that was designed with a nulling interferometer. The strategy that is used is described in detail.

  14. Macroporous silicon for high-capacitance devices using metal electrodes.

    Science.gov (United States)

    Vega, Didac; Reina, Jordi; Martí, Ferran; Pavón, Ramón; Rodríguez, Angel

    2014-01-01

    In this paper, high-capacity energy storage devices based on macroporous silicon are demonstrated. Small footprint devices with large specific capacitances up to 100 nF/mm(2), and an absolute capacitance above 15 μF, have been successfully fabricated using standard microelectronics and MEMS techniques. The fabricated devices are suitable for high-density system integration. The use of 3-D silicon structures allows achieving a large surface to volume ratio. The macroporous silicon structures are fabricated by electrochemical etching of silicon. This technique allows creating large structures of tubes with either straight or modulated radial profiles in depth. Furthermore, a very large aspect ratio is possible with this fabrication method. Macroporous silicon grown this way permits well-controlled structure definition with excellent repeatability and surface quality. Additionally, structure geometry can be accurately controlled to meet designer specifications. Macroporous silicon is used as one of the electrodes over which a silicon dioxide insulating layer is grown. Several insulator thicknesses have been tested. The second capacitor electrode is a solid nickel filling of the pores prepared by electroplating in a low-temperature industry standard process. The use of high-conductivity materials allows reaching small equivalent series resistance near 1 Ω. Thanks to these improvements, the presented devices are capable of operating up to 10 kHz. 84.32.Tt; 81.15.Pq; 81.05.Rm.

  15. Thermoelectrical Generator for a MEMS-Fuze

    Directory of Open Access Journals (Sweden)

    A. K. Efremov

    2015-01-01

    Full Text Available The structure of modern fuzes includes micro-electromechanical systems (MEMS, which have such advanced devices as micro-accelerometers and micro-switches, being triggered at a specified level of setback. Independent power source (PS, as an inherent part of the MEMSfuze, charges an energy storage unit during the shot and triggers the fuze firing circuit when the shell encounters the target. Operating level of the control signal should be achieved within the time of remote arming, determined by the type of ammunition. The paper considers a possibility to develop PS as a thermoelectric generator (TEG with aerodynamic heating of hot junctions due to friction of the projectile body on the incoming airflow. The initial temperature is determined by the driving band cutting into the rifling and friction during the movement of projectile through the tube bore. The paper presents a technique for calculating the temperature field along the body of the projectile from the critical point, located at the top of the shell head. The solution of the equation of heat balance reveals the temporal development of the projectile body temperature. The proposed mathematical model of the TEG describes the process of converting heat into electrical output signal (thermo-EMF. An example of calculation for a specific artillery system – 57-mm anti-aircraft gun S-60 is given. Calculation of the TEG output signal was limited by the time, which is necessary to reach the top of the projectile trajectory. It is shown that at high altitude the temperature difference may drop to zero, thus cutting off the TEG output signal. Selection of capacitive storage parameters can be based on the reliability test conditions of the fuze firing circuit actuators, taking into account the partial storage discharge on the trajectory before the projectile encounters the target.

  16. Bioenergetics of mammalian sperm capacitation.

    Science.gov (United States)

    Ferramosca, Alessandra; Zara, Vincenzo

    2014-01-01

    After ejaculation, the mammalian male gamete must undergo the capacitation process, which is a prerequisite for egg fertilization. The bioenergetics of sperm capacitation is poorly understood despite its fundamental role in sustaining the biochemical and molecular events occurring during gamete activation. Glycolysis and mitochondrial oxidative phosphorylation (OXPHOS) are the two major metabolic pathways producing ATP which is the primary source of energy for spermatozoa. Since recent data suggest that spermatozoa have the ability to use different metabolic substrates, the main aim of this work is to present a broad overview of the current knowledge on the energy-producing metabolic pathways operating inside sperm mitochondria during capacitation in different mammalian species. Metabolism of glucose and of other energetic substrates, such as pyruvate, lactate, and citrate, is critically analyzed. Such knowledge, besides its obvious importance for basic science, could eventually translate into the development of novel strategies for treatment of male infertility, artificial reproduction, and sperm selection methods.

  17. Ka-Band, MEMS Switched Line Phase Shifters Implemented in Finite Ground Coplanar Waveguide

    Science.gov (United States)

    Scardelletti, Maximilian C.; Ponchak, George E.; Varaljay, Nicholas C.

    2005-01-01

    Ka-band MEMS switched line phase shifters implemented in finite ground coplanar waveguide are described in this paper. The phase shifters are constructed of single-pole double-throw (SPDT) switches with additional reference and phase offset transmission line lengths. The one- and two-bit phase shifters are fabricated on high resistivity (HR) silicon with a dielectric constant, Epsilon(sub T) = 11.7 and a substrate thickness, t = 500microns. The switching architectures integrated within the phase shifters consist of MEMS switches that are doubly anchored cantilever beam capacitive switches with additional high inductive sections (MEMS LC device). The SPDT switch is composed of a T-junction with a MEMS LC device at each output port. The one-bit phase shifter described in this paper has an insertion loss (IL) and return loss (RL) of 0.9 dB and 30 dB while the two-bit described has an IL and RL of 1.8 dB and 30 dB respectively. The one-bit phase shifter's designed offset phase is 22.5deg and actual measured phase shift is 21.8deg. The two-bit phase shifter's designed offset phase is 22.5deg, 45deg, and 67.5deg and the actual measured phase shifts are 21.4deg, 44.2deg, and 65.8deg, respectively.

  18. Implementation issues of the nearfield equivalent source imaging microphone array

    Science.gov (United States)

    Bai, Mingsian R.; Lin, Jia-Hong; Tseng, Chih-Wen

    2011-01-01

    This paper revisits a nearfield microphone array technique termed nearfield equivalent source imaging (NESI) proposed previously. In particular, various issues concerning the implementation of the NESI algorithm are examined. The NESI can be implemented in both the time domain and the frequency domain. Acoustical variables including sound pressure, particle velocity, active intensity and sound power are calculated by using multichannel inverse filters. Issues concerning sensor deployment are also investigated for the nearfield array. The uniform array outperformed a random array previously optimized for far-field imaging, which contradicts the conventional wisdom in far-field arrays. For applications in which only a patch array with scarce sensors is available, a virtual microphone approach is employed to ameliorate edge effects using extrapolation and to improve imaging resolution using interpolation. To enhance the processing efficiency of the time-domain NESI, an eigensystem realization algorithm (ERA) is developed. Several filtering methods are compared in terms of computational complexity. Significant saving on computations can be achieved using ERA and the frequency-domain NESI, as compared to the traditional method. The NESI technique was also experimentally validated using practical sources including a 125 cc scooter and a wooden box model with a loudspeaker fitted inside. The NESI technique proved effective in identifying broadband and non-stationary sources produced by the sources.

  19. On determination of microphone response and other parameters by a hybrid experimental and numerical method

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Jacobsen, Finn; Rasmussen, Knud

    2008-01-01

    Typically, numerical calculations of the pressure, free-field and random-incidence response of a condenser microphone are carried out on the basis of an assumed displacement distribution of the diaphragm of the microphone; the conventional assumption is that the displacement follows a Bessel...

  20. Hybrid method for determining the parameters of condenser microphones from measured membrane velocities and numerical calculations

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Rasmussen, Knud; Jacobsen, Finn

    2009-01-01

    Typically, numerical calculations of the pressure, free-field, and random-incidence response of a condenser microphone are carried out on the basis of an assumed displacement distribution of the diaphragm of the microphone; the conventional assumption is that the displacement follows a Bessel...

  1. A time-selective technique for free-field reciprocity calibration of condenser microphones

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Rasmussen, Knud; Jacobsen, Finn

    2003-01-01

    In normal practice, microphones are calibrated in a closed coupler where the sound pressure is uniformly distributed over the diaphragm. Alternatively, microphones can be placed in a free field, although in that case the distribution of sound pressure over the diaphragm will change as a result...

  2. On the interference between the two microphones in free-field reciprocity calibration

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Rasmussen, Knud; Jacobsen, Finn

    2004-01-01

    is not strictly valid. The interference has been thought to be caused by specular reflection between the parallel diaphragms of the microphones, and a solution based on tilting the axis of one of the microphones a few degrees has been proposed, but never examined in practice. In this paper a time...

  3. Radiation impedance of condenser microphones and their diffuse-field responses

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Rasmussen, Knud; Jacobsen, Finn

    2010-01-01

    The relation between the diffuse-field response and the radiation impedance of a microphone has been investigated. Such a relation can be derived from classical theory. The practical measurement of the radiation impedance requires (a) measuring the volume velocity of the membrane of the microphon...

  4. A note on determination of the diffuse-field sensitivity of microphones using the reciprocity technique

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Jacobsen, Finn

    2008-01-01

    The diffuse-field response of a microphone is usually obtained by adding a random-incidence correction to the pressure response of the microphone. However, the random-incidence correction is determined from a relative measurement, and its accuracy depends not only on the relative response at all ...

  5. Robustness of a Mixed-Order Ambisonics Microphone Array for Sound Field Reproduction

    DEFF Research Database (Denmark)

    Marschall, Marton; Favrot, Sylvain Emmanuel; Buchholz, Jörg

    2012-01-01

    Spherical microphone arrays can be used to capture and reproduce the spatial characteristics of acoustic scenes. A mixed-order Ambisonics (MOA) approach was recently proposed to improve the horizontal spatial resolution of microphone arrays with a given number of transducers. In this paper...

  6. Beamforming with a circular microphone array for localization of environmental noise sources

    DEFF Research Database (Denmark)

    Tiana Roig, Elisabet; Jacobsen, Finn; Fernandez Grande, Efren

    2010-01-01

    It is often enough to localize environmental sources of noise from different directions in a plane. This can be accomplished with a circular microphone array, which can be designed to have practically the same resolution over 360. The microphones can be suspended in free space or they can...

  7. Beamforming with a circular microphone array for localization of environmental sources of noise

    DEFF Research Database (Denmark)

    Tiana Roig, Elisabet; Jacobsen, Finn; Fernandez Grande, Efren

    2010-01-01

    It is often enough to localize environmental sources of noise from different directions in a plane. This can be accomplished with a circular microphone array, which can be designed to have practically the same resolution over 360. The microphones can be suspended in free space or they can...

  8. Precision Measurements of Wind Turbine Noise using a Large Aperture Microphone Array

    DEFF Research Database (Denmark)

    Bradley, Stuart; Mikkelsen, Torben Krogh; Hünerbein, Sabine Von

    2016-01-01

    Experiments are described with a large microphone array (40 m scale) recording wind turbine noise. The array comprised 42 purpose-designed low-noise microphones simultaneously sampled at 20 kHz. Very high quality, fast, meteorological profile data was available from nearby 80 m masts and from the...

  9. Computer-Aided Design (CAD) for Integrated Microelectromechanical (MEMS) Devices

    National Research Council Canada - National Science Library

    Judy, Michael

    2002-01-01

    The objective of this "CAD for Integrated MEMS Devices" research project was to develop MEMS CAD design and development tools that would facilitate the creation of behavioral models for complex MEMS devices...

  10. 7.9 pJ/Step Energy-Efficient Multi-Slope 13-bit Capacitance-to-Digital Converter

    KAUST Repository

    Omran, Hesham

    2014-08-01

    In this brief, an energy-efficient capacitance-to-digital converter (CDC) is presented. The proposed CDC uses digitally controlled coarse-fine multi-slope integration to digitize a wide range of capacitance in short conversion time. Both integration current and frequency are scaled, which leads to significant improvement in the energy efficiency of both analog and digital circuitry. Mathematical analysis for circuit nonidealities, noise, and improvement in energy efficiency is provided. A prototype fabricated in a 0.35-μm CMOS process occupies 0.09 mm2 and consumes a total of 153 μA from 3.3 V supply while achieving 13-bit resolution. The operation of the prototype is experimentally verified using MEMS capacitive pressure sensor. Compared to recently published work, the prototype achieves an excellent energy efficiency of 7.9 pJ/Step. © 2004-2012 IEEE.

  11. Integration of a MEMS Inertial Measuring Unit with a MEMS Magnetometer for 3D Orientation Estimation

    DEFF Research Database (Denmark)

    Cai, Junping; Malureanu, Christian; Andersen, Niels Lervad

    2011-01-01

    This paper presents an algorithm for combining the measurements of a MEMS Inertial Measurement Unit (IMU) and a MEMS magnetometer. The measurements are done using a special designed and customized miniature detecting system for 3D orientation estimation, and position tracking......This paper presents an algorithm for combining the measurements of a MEMS Inertial Measurement Unit (IMU) and a MEMS magnetometer. The measurements are done using a special designed and customized miniature detecting system for 3D orientation estimation, and position tracking...

  12. Driven shielding capacitive proximity sensor

    Science.gov (United States)

    Vranish, John M. (Inventor); McConnell, Robert L. (Inventor)

    2000-01-01

    A capacitive proximity sensing element, backed by a reflector driven at the same voltage as and in phase with the sensor, is used to reflect the field lines away from a grounded robot arm towards an intruding object, thus dramatically increasing the sensor's range and sensitivity.

  13. Voltage Dependence of Supercapacitor Capacitance

    Directory of Open Access Journals (Sweden)

    Szewczyk Arkadiusz

    2016-09-01

    Full Text Available Electronic Double-Layer Capacitors (EDLC, called Supercapacitors (SC, are electronic devices that are capable to store a relatively high amount of energy in a small volume comparing to other types of capacitors. They are composed of an activated carbon layer and electrolyte solution. The charge is stored on electrodes, forming the Helmholtz layer, and in electrolyte. The capacitance of supercapacitor is voltage- dependent. We propose an experimental method, based on monitoring of charging and discharging a supercapacitor, which enables to evaluate the charge in an SC structure as well as the Capacitance-Voltage (C-V dependence. The measurement setup, method and experimental results of charging/discharging commercially available supercapacitors in various voltage and current conditions are presented. The total charge stored in an SC structure is proportional to the square of voltage at SC electrodes while the charge on electrodes increases linearly with the voltage on SC electrodes. The Helmholtz capacitance increases linearly with the voltage bias while a sublinear increase of total capacitance was found. The voltage on SC increases after the discharge of electrodes due to diffusion of charges from the electrolyte to the electrodes. We have found that the recovery voltage value is linearly proportional to the initial bias voltage value.

  14. A MEMS Interface IC With Low-Power and Wide-Range Frequency-to-Voltage Converter for Biomedical Applications.

    Science.gov (United States)

    Arefin, Md Shamsul; Redouté, Jean-Michel; Yuce, Mehmet Rasit

    2016-04-01

    This paper presents an interface circuit for capacitive and inductive MEMS biosensors using an oscillator and a charge pump based frequency-to-voltage converter. Frequency modulation using a differential crossed coupled oscillator is adopted to sense capacitive and inductive changes. The frequency-to-voltage converter is designed with a negative feedback system and external controlling parameters to adjust the sensitivity, dynamic range, and nominal point for the measurement. The sensitivity of the frequency-to-voltage converter is from 13.28 to 35.96 mV/MHz depending on external voltage and charging current. The sensitivity ranges of the capacitive and inductive interface circuit are 17.08 to 54.4 mV/pF and 32.11 to 82.88 mV/mH, respectively. A capacitive MEMS based pH sensor is also connected with the interface circuit to measure the high acidic gastric acid throughout the digestive tract. The sensitivity for pH from 1 to 3 is 191.4 mV/pH with 550 μV(pp) noise. The readout circuit is designed and fabricated using the UMC 0.18 μm CMOS technology. It occupies an area of 0.18 mm (2) and consumes 11.8 mW.

  15. Characterization of Textile-Insulated Capacitive Biosensors

    OpenAIRE

    Ng, Charn Loong; Reaz, Mamun Bin Ibne

    2017-01-01

    Capacitive biosensors are an emerging technology revolutionizing wearable sensing systems and personal healthcare devices. They are capable of continuously measuring bioelectrical signals from the human body while utilizing textiles as an insulator. Different textile types have their own unique properties that alter skin-electrode capacitance and the performance of capacitive biosensors. This paper aims to identify the best textile insulator to be used with capacitive biosensors by analysing ...

  16. Capacitive Proximity Sensor Has Longer Range

    Science.gov (United States)

    Vranish, John M.

    1992-01-01

    Capacitive proximity sensor on robot arm detects nearby object via capacitive effect of object on frequency of oscillator. Sensing element part of oscillator circuit operating at about 20 kHz. Total capacitance between sensing element and ground constitutes tuning capacitance of oscillator. Sensor circuit includes shield driven by replica of alternating voltage applied to sensing element. Driven shield concentrates sensing electrostatic field in exterior region to enhance sensitivity to object. Sensitivity and dynamic range has corresponding 12-to-1 improvement.

  17. Differential capacitive sensing circuit for a multi-electrode capacitive force sensor

    NARCIS (Netherlands)

    Brookhuis, Robert Anton; Lammerink, Theodorus S.J.; Wiegerink, Remco J.

    2015-01-01

    A multi-electrode differential capacitive sensing circuit is designed and realized for the read-out of a multi-axis capacitive force–torque sensor. The sensing circuit is based on a differential relaxation oscillator, to which multiple capacitances can be connected. For selecting the capacitances,

  18. Miniaturized GPS/MEMS IMU integrated board

    Science.gov (United States)

    Lin, Ching-Fang (Inventor)

    2012-01-01

    This invention documents the efforts on the research and development of a miniaturized GPS/MEMS IMU integrated navigation system. A miniaturized GPS/MEMS IMU integrated navigation system is presented; Laser Dynamic Range Imager (LDRI) based alignment algorithm for space applications is discussed. Two navigation cameras are also included to measure the range and range rate which can be integrated into the GPS/MEMS IMU system to enhance the navigation solution.

  19. Numerical design and testing of a sound source for secondary calibration of microphones using the Boundary Element Method

    DEFF Research Database (Denmark)

    Cutanda Henriquez, Vicente; Juhl, Peter Møller; Barrera Figueroa, Salvador

    2009-01-01

    Secondary calibration of microphones in free field is performed by placing the microphone under calibration in an anechoic chamber with a sound source, and exposing it to a controlled sound field. A calibrated microphone is also measured as a reference. While the two measurements are usually made...

  20. A practical implementation of microphone free-field comparison calibration according to the standard IEC 61094-8

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Torras Rosell, Antoni; Rasmussen, Knud

    2012-01-01

    An international standard concerned with the calibration of microphones in a free field by comparison has recently been published. The standard contemplates two main calibration methodologies for determining the sensitivity of a microphone under test when compared against a reference microphone. ...

  1. Design and Simulation of RF MEMS Switch for Wireless Communication Applications

    Directory of Open Access Journals (Sweden)

    Girija Sravani K.

    2015-12-01

    Full Text Available In this paper, we have reported the design and analysis of a novel bulk-silicon fabricated RF MEMS capacitive switch. This RF switch has a short response time, low power consumption, and an IC compatible design. To lower the driving voltage and insertion loss, multiple geometries for the movable beam, membrane, and air gap are investigated using Software tool Comsol Multiphysics. Potential thermal stresses and deflection of the cantilever due to the application of forces have been investigated. Performance of the device under the application of forces also studied using the software.

  2. Pulse mode actuation-readout system based on MEMS resonator for liquid sensing

    DEFF Research Database (Denmark)

    Tang, Meng; Cagliani, Alberto; Davis, Zachary James

    2014-01-01

    A MEMS (Micro-Electro-Mechanical Systems) bulk disk resonator is applied for mass sensing under its dynamic mode. The classical readout circuitry involves sophisticated feedback loop and feedthrough compensation. We propose a simple straightforward non-loop pulse mode actuation and capacitive...... readout scheme. In order to verify its feasibility in liquid bio-chemical sensing environment, an experimental measurement is conducted with humidity sensing application. The measured resonant frequency changes 60kHz of 67.7MHz with a humidity change of 0~80%....

  3. Wafer level packaging of MEMS

    International Nuclear Information System (INIS)

    Esashi, Masayoshi

    2008-01-01

    Wafer level packaging plays many important roles for MEMS (micro electro mechanical systems), including cost, yield and reliability. MEMS structures on silicon chips are encapsulated between bonded wafers or by surface micromachining, and electrical interconnections are made from the cavity. Bonding at the interface, such as glass–Si anodic bonding and metal-to-metal bonding, requires electrical interconnection through the lid vias in many cases. On the other hand, lateral electrical interconnections on the surface of the chip are used for bonding with intermediate melting materials, such as low melting point glass and solder. The cavity formed by surface micromachining is made using sacrificial etching, and the openings needed for the sacrificial etching are plugged using deposition sealing methods. Vacuum packaging methods and the structures for electrical feedthrough for the interconnection are discussed in this review. (topical review)

  4. Cryogenic MEMS Technology for Sensing Applications Project

    Data.gov (United States)

    National Aeronautics and Space Administration — The development of cryogenic microwave components, such as focal plane polarization modulators, first requires an RF MEMS switching technology that operates...

  5. MEMS Bragg grating force sensor

    DEFF Research Database (Denmark)

    Reck, Kasper; Thomsen, Erik Vilain; Hansen, Ole

    2011-01-01

    We present modeling, design, fabrication and characterization of a new type of all-optical frequency modulated MEMS force sensor based on a mechanically amplified double clamped waveguide beam structure with integrated Bragg grating. The sensor is ideally suited for force measurements in harsh...... environments and for remote and distributed sensing and has a measured sensitivity of -14 nm/N, which is several times higher than what is obtained in conventional fiber Bragg grating force sensors. © 2011 Optical Society of America....

  6. Impact of oxide thickness on gate capacitance – Modelling and ...

    Indian Academy of Sciences (India)

    approaches the nanometer regime, the oxide capacitance Cox becomes comparable to the inversion layer capacitance Cinv which means that the quantum capacitance CQ and the centroid capacitance Ccent start to affect the gate capacitance [8]. The centroid capacitance. Ccent is related to the average physical distance ...

  7. Source Coding for Wireless Distributed Microphones in Reverberant Environments

    DEFF Research Database (Denmark)

    Zahedi, Adel

    2016-01-01

    's recording. This means that ignoring this correlation will be a waste of the scarce power and bandwidth resources. In this thesis, we study both information-theoretic and audio coding aspects of the coding problem in the above-mentioned framework. We formulate rate-distortion problems which take into account...... on the performance of the audio coding system. We derive explicit formulas for the rate-distortion functions, and design coding schemes that asymptotically achieve the performance bounds. We justify the Gaussianity assumption by showing that the results will still be relevant for non-Gaussian sources including audio...... for the transmitting microphone to reduce the rate by using distributed source coding. Within this framework, we apply our coding schemes to Gaussian signals as well as audio measurements and compare the rate-distortion performances for distributed and non-distributed source coding scenarios. We also compare...

  8. Regularised reconstruction of sound fields with a spherical microphone array

    DEFF Research Database (Denmark)

    Granados Corsellas, Alba; Jacobsen, Finn; Fernandez Grande, Efren

    2013-01-01

    Spherical near field acoustic holography with microphones mounted on a rigid spherical surface is used to reconstruct the incident sound field. However, reconstruction outside the sphere is an ill-posed inverse problem, and since this is very sensitive to the measurement noise, straightforward...... implementation might lead to disastrous reconstructions. A large number of regularisation tools based on singular value decomposition are available, and it has been found that the acoustic holography problem for certain geometries can be formulated in such a way that similarities to singular value decomposition...... become apparent. Hence, a number of regularisation methods, including truncated singular value decomposition, standard Tikhonov, constrained Tikhonov, iterative Tikhonov, Landweber and Rutishauser, have been adapted for spherical near field acoustic holography. The accuracy of the methods is examined...

  9. Plane-wave decomposition by spherical-convolution microphone array

    Science.gov (United States)

    Rafaely, Boaz; Park, Munhum

    2004-05-01

    Reverberant sound fields are widely studied, as they have a significant influence on the acoustic performance of enclosures in a variety of applications. For example, the intelligibility of speech in lecture rooms, the quality of music in auditoria, the noise level in offices, and the production of 3D sound in living rooms are all affected by the enclosed sound field. These sound fields are typically studied through frequency response measurements or statistical measures such as reverberation time, which do not provide detailed spatial information. The aim of the work presented in this seminar is the detailed analysis of reverberant sound fields. A measurement and analysis system based on acoustic theory and signal processing, designed around a spherical microphone array, is presented. Detailed analysis is achieved by decomposition of the sound field into waves, using spherical Fourier transform and spherical convolution. The presentation will include theoretical review, simulation studies, and initial experimental results.

  10. A Flexible Capacitive Sensor with Encapsulated Liquids as Dielectrics

    Directory of Open Access Journals (Sweden)

    Yasunari Hotta

    2012-03-01

    Full Text Available Flexible and high-sensitive capacitive sensors are demanded to detect pressure distribution and/or tactile information on a curved surface, hence, wide varieties of polymer-based flexible MEMS sensors have been developed. High-sensitivity may be achieved by increasing the capacitance of the sensor using solid dielectric material while it deteriorates the flexibility. Using air as the dielectric, to maintain the flexibility, sacrifices the sensor sensitivity. In this paper, we demonstrate flexible and highly sensitive capacitive sensor arrays that encapsulate highly dielectric liquids as the dielectric. Deionized water and glycerin, which have relative dielectric constants of approximately 80 and 47, respectively, could increase the capacitance of the sensor when used as the dielectric while maintaining flexibility of the sensor with electrodes patterned on flexible polymer substrates. A reservoir of liquids between the electrodes was designed to have a leak path, which allows the sensor to deform despite of the incompressibility of the encapsulated liquids. The proposed sensor was microfabricated and demonstrated successfully to have a five times greater sensitivity than sensors that use air as the dielectric.

  11. A novel deflection shape function for rectangular capacitive micromachined ultrasonic transducer diaphragms

    Directory of Open Access Journals (Sweden)

    Zhou Zheng

    2015-09-01

    Full Text Available A highly accurate analytical deflection shape function that describes the deflection profiles of capacitive micromachined ultrasonic transducers (CMUTs with rectangular membranes under electrostatic pressure has been formulated. The rectangular diaphragms have a thickness range of 0.6–1.5 μm and a side length range of 100–1000 μm. The new deflection shape function generates deflection profiles that are in excellent agreement with finite element analysis (FEA results for a wide range of geometry dimensions and loading conditions. The deflection shape function is used to analyze membrane deformations and to calculate the capacitances between the deformed membranes and the fixed back plates. In 50 groups of random tests, compared with FEA results, the calculated capacitance values have a maximum deviation of 1.486% for rectangular membranes. The new analytical deflection function can provide designers with a simple way of gaining insight into the effects of designed parameters for CMUTs and other MEMS-based capacitive type sensors.

  12. Challenges in the Packaging of MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Malshe, A.P.; Singh, S.B.; Eaton, W.P.; O' Neal, C.; Brown, W.D.; Miller, W.M.

    1999-03-26

    The packaging of Micro-Electro-Mechanical Systems (MEMS) is a field of great importance to anyone using or manufacturing sensors, consumer products, or military applications. Currently much work has been done in the design and fabrication of MEMS devices but insufficient research and few publications have been completed on the packaging of these devices. This is despite the fact that packaging is a very large percentage of the total cost of MEMS devices. The main difference between IC packaging and MEMS packaging is that MEMS packaging is almost always application specific and greatly affected by its environment and packaging techniques such as die handling, die attach processes, and lid sealing. Many of these aspects are directly related to the materials used in the packaging processes. MEMS devices that are functional in wafer form can be rendered inoperable after packaging. MEMS dies must be handled only from the chip sides so features on the top surface are not damaged. This eliminates most current die pick-and-place fixtures. Die attach materials are key to MEMS packaging. Using hard die attach solders can create high stresses in the MEMS devices, which can affect their operation greatly. Low-stress epoxies can be high-outgassing, which can also affect device performance. Also, a low modulus die attach can allow the die to move during ultrasonic wirebonding resulting to low wirebond strength. Another source of residual stress is the lid sealing process. Most MEMS based sensors and devices require a hermetically sealed package. This can be done by parallel seam welding the package lid, but at the cost of further induced stress on the die. Another issue of MEMS packaging is the media compatibility of the packaged device. MEMS unlike ICS often interface with their environment, which could be high pressure or corrosive. The main conclusion we can draw about MEMS packaging is that the package affects the performance and reliability of the MEMS devices. There is a

  13. Flexible Framework for Capacitive Sensing

    Science.gov (United States)

    Woodard, Stanley E. (Inventor); Taylor, Bryant D. (Inventor)

    2006-01-01

    A flexible framework supports electrically-conductive elements in a capacitive sensing arrangement. Identical frames are arranged end-to-end with adjacent frames being capable of rotational movement there between. Each frame has first and second passages extending therethrough and parallel to one another. Each of the first and second passages is adapted to receive an electrically-conductive element therethrough. Each frame further has a hollowed-out portion for the passage of a fluent material therethrough. The hollowed-out portion is sized and shaped to provide for capacitive sensing along a defined region between the electrically-conductive element in the first passage and the electrically-conductive element in the second passage.

  14. The impact of the microphone position on the frequency analysis of snoring sounds.

    Science.gov (United States)

    Herzog, Michael; Kühnel, Thomas; Bremert, Thomas; Herzog, Beatrice; Hosemann, Werner; Kaftan, Holger

    2009-08-01

    Frequency analysis of snoring sounds has been reported as a diagnostic tool to differentiate between different sources of snoring. Several studies have been published presenting diverging results of the frequency analyses of snoring sounds. Depending on the position of the used microphones, the results of the frequency analysis of snoring sounds vary. The present study investigated the influence of different microphone positions on the outcome of the frequency analysis of snoring sounds. Nocturnal snoring was recorded simultaneously at six positions (air-coupled: 30 cm middle, 100 cm middle, 30 cm lateral to both sides of the patients' head; body contact: neck and parasternal) in five patients. The used microphones had a flat frequency response and a similar frequency range (10/40 Hz-18 kHz). Frequency analysis was performed by fast Fourier transformation and frequency bands as well as peak intensities (Peaks 1-5) were detected. Air-coupled microphones presented a wider frequency range (60 Hz-10 kHz) compared to contact microphones. The contact microphone at cervical position presented a cut off at frequencies above 300 Hz, whereas the contact microphone at parasternal position revealed a cut off above 100 Hz. On an exemplary base, the study demonstrates that frequencies above 1,000 Hz do appear in complex snoring patterns, and it is emphasised that high frequencies are imported for the interpretation of snoring sounds with respect to the identification of the source of snoring. Contact microphones might be used in screening devices, but for a natural analysis of snoring sounds the use of air-coupled microphones is indispensable.

  15. Capacitive micromachined ultrasonic transducers with through-wafer interconnects

    Science.gov (United States)

    Zhuang, Xuefeng

    Capacitive micromachined ultrasonic transducer (CMUT) is a promising candidate for making ultrasound transducer arrays for applications such as 3D medical ultrasound, non-destructive evaluation and chemical sensing. Advantages of CMUTs over traditional piezoelectric transducers include low-cost batch fabrication, wide bandwidth, and ability to fabricate arrays with broad operation frequency range and different geometric configurations on a single wafer. When incorporated with through-wafer interconnects, a CMUT array can be directly integrated with a front-end integrated circuit (IC) to achieve compact packaging and to mitigate the effects of the parasitic capacitance from the connection cables. Through-wafer via is the existing interconnect scheme for CMUT arrays, and many other types of micro-electro-mechanical system (MEMS) devices. However, to date, no successful through-wafer via fabrication technique compatible with the wafer-bonding method of making CMUT arrays has been demonstrated. The through-wafer via fabrication steps degrade the surface conditions of the wafer, reduce the radius of curvature, thus making it difficult to bond. This work focuses on new through-wafer interconnect techniques that are compatible with common MEMS fabrication techniques, including both surface-micromachining and direct wafer-to-wafer fusion bonding. In this dissertation, first, a through-wafer via interconnect technique with improved characteristics is presented. Then, two implementations of through-wafer trench isolation are demonstrated. The through-wafer trench methods differ from the through-wafer vias in that the electrical conduction is through the bulk silicon instead of the conductor in the vias. In the first implementation, a carrier wafer is used to provide mechanical support; in the second, mechanical support is provided by a silicon frame structure embedded inside the isolation trenches. Both implementations reduce fabrication complexity compared to the through

  16. Acoustic Feedback and Echo Cancellation Strategies for Multiple-Microphone and Single-Loudspeaker Systems

    DEFF Research Database (Denmark)

    Guo, Meng; Elmedyb, Thomas Bo; Jensen, Søren Holdt

    2011-01-01

    Acoustic feedback/echo cancellation in a multiple-microphone and single-loudspeaker system is often carried out using a cancellation filter for each microphone channel, and the filters are adaptively estimated, independently of each other. In this work, we consider another strategy by estimating...... all the cancellation filters jointly and in this way exploit information from all microphone channels. We determine the statistical system behavior for the joint estimation strategy in terms of the convergence rate and steady-state behavior across time and frequency. We assess if an improved...

  17. Direction Finding Using Multiple MEMS Acoustic Sensors

    Science.gov (United States)

    2015-09-01

    MEMS ACOUSTIC SENSORS by Daniel Wilmott September 2015 Thesis Advisor: Gamani Karunasiri Co-Advisor: Fabio Alves THIS PAGE INTENTIONALLY LEFT......resonance over an angular range of 120° with a maximum uncertainty of 3.4°. 14. SUBJECT TERMS MEMS , direction finding, Ormia ochracea, acoustic sensor

  18. Listening to MEMS : An acoustic vibrometer

    NARCIS (Netherlands)

    Yntema, Doekle Reinder; Haneveld, J.; Engelen, Johannes Bernardus Charles; Brookhuis, Robert Anton; Sanders, Remco G.P.; Wiegerink, Remco J.; Elwenspoek, Michael Curt

    2010-01-01

    new way to characterize vibrating MEMS devices is presented. Using an acoustic particle velocity sensor the coupled sound field is measured, which is a measure for the movement of the MEMS device. We present several possible applications of this measurement method. It can be used as a read-out

  19. A Teaching - Learning Framework for MEMS Education

    International Nuclear Information System (INIS)

    Sheeparamatti, B G; Angadi, S A; Sheeparamatti, R B; Kadadevaramath, J S

    2006-01-01

    Micro-Electro-Mechanical Systems (MEMS) technology has been identified as one of the most promising technologies in the 21st century. MEMS technology has opened up a wide array of unforeseen applications. Hence it is necessary to train the technocrats of tomorrow in this emerging field to meet the industrial/societal demands. The drive behind fostering of MEMS technology is the reduction in the cost, size, weight, and power consumption of the sensors, actuators, and associated electronics. MEMS is a multidisciplinary engineering and basic science area which includes electrical engineering, mechanical engineering, material science and biomedical engineering. Hence MEMS education needs a special approach to prepare the technocrats for a career in MEMS. The modern education methodology using computer based training systems (CBTS) with embedded modeling and simulation tools will help in this direction. The availability of computer based learning resources such as MATLAB, ANSYS/Multiphysics and rapid prototyping tools have contributed to proposition of an efficient teaching-learning framework for MEMS education presented in this paper. This paper proposes a conceptual framework for teaching/learning MEMS in the current technical education scenario

  20. Capacitance variation measurement method with a continuously variable measuring range for a micro-capacitance sensor

    International Nuclear Information System (INIS)

    Lü, Xiaozhou; Xie, Kai; Xue, Dongfeng; Zhang, Feng; Qi, Liang; Tao, Yebo; Li, Teng; Bao, Weimin; Wang, Songlin; Li, Xiaoping; Chen, Renjie

    2017-01-01

    Micro-capacitance sensors are widely applied in industrial applications for the measurement of mechanical variations. The measurement accuracy of micro-capacitance sensors is highly dependent on the capacitance measurement circuit. To overcome the inability of commonly used methods to directly measure capacitance variation and deal with the conflict between the measurement range and accuracy, this paper presents a capacitance variation measurement method which is able to measure the output capacitance variation (relative value) of the micro-capacitance sensor with a continuously variable measuring range. We present the principles and analyze the non-ideal factors affecting this method. To implement the method, we developed a capacitance variation measurement circuit and carried out experiments to test the circuit. The result shows that the circuit is able to measure a capacitance variation range of 0–700 pF linearly with a maximum relative accuracy of 0.05% and a capacitance range of 0–2 nF (with a baseline capacitance of 1 nF) with a constant resolution of 0.03%. The circuit is proposed as a new method to measure capacitance and is expected to have applications in micro-capacitance sensors for measuring capacitance variation with a continuously variable measuring range. (paper)

  1. Wireless Capacitive Pressure Sensor With Directional RF Chip Antenna for High Temperature Environments

    Science.gov (United States)

    Scardelletti, M. C.; Jordan, J. L.; Ponchak, G. E.; Zorman, C. A.

    2015-01-01

    This paper presents the design, fabrication and characterization of a wireless capacitive pressure sensor with directional RF chip antenna that is envisioned for the health monitoring of aircraft engines operating in harsh environments. The sensing system is characterized from room temperature (25 C) to 300 C for a pressure range from 0 to 100 psi. The wireless pressure system consists of a Clapp-type oscillator design with a capacitive MEMS pressure sensor located in the LC-tank circuit of the oscillator. Therefore, as the pressure of the aircraft engine changes, so does the output resonant frequency of the sensing system. A chip antenna is integrated to transmit the system output to a receive antenna 10 m away.The design frequency of the wireless pressure sensor is 127 MHz and a 2 increase in resonant frequency over the temperature range of 25 to 300 C from 0 to 100 psi is observed. The phase noise is less than minus 30 dBcHz at the 1 kHz offset and decreases to less than minus 80 dBcHz at 10 kHz over the entire temperature range. The RF radiation patterns for two cuts of the wireless system have been measured and show that the system is highly directional and the MEMS pressure sensor is extremely linear from 0 to 100 psi.

  2. Redox regulation of mammalian sperm capacitation

    Directory of Open Access Journals (Sweden)

    Cristian O′Flaherty

    2015-01-01

    Full Text Available Capacitation is a series of morphological and metabolic changes necessary for the spermatozoon to achieve fertilizing ability. One of the earlier happenings during mammalian sperm capacitation is the production of reactive oxygen species (ROS that will trigger and regulate a series of events including protein phosphorylation, in a time-dependent fashion. The identity of the sperm oxidase responsible for the production of ROS involved in capacitation is still elusive, and several candidates are discussed in this review. Interestingly, ROS-induced ROS formation has been described during human sperm capacitation. Redox signaling during capacitation is associated with changes in thiol groups of proteins located on the plasma membrane and subcellular compartments of the spermatozoon. Both, oxidation of thiols forming disulfide bridges and the increase on thiol content are necessary to regulate different sperm proteins associated with capacitation. Reducing equivalents such as NADH and NADPH are necessary to support capacitation in many species including humans. Lactate dehydrogenase, glucose-6-phospohate dehydrogenase, and isocitrate dehydrogenase are responsible in supplying NAD (P H for sperm capacitation. Peroxiredoxins (PRDXs are newly described enzymes with antioxidant properties that can protect mammalian spermatozoa; however, they are also candidates for assuring the regulation of redox signaling required for sperm capacitation. The dysregulation of PRDXs and of enzymes needed for their reactivation such as thioredoxin/thioredoxin reductase system and glutathione-S-transferases impairs sperm motility, capacitation, and promotes DNA damage in spermatozoa leading to male infertility.

  3. Redox regulation of mammalian sperm capacitation

    Science.gov (United States)

    O’Flaherty, Cristian

    2015-01-01

    Capacitation is a series of morphological and metabolic changes necessary for the spermatozoon to achieve fertilizing ability. One of the earlier happenings during mammalian sperm capacitation is the production of reactive oxygen species (ROS) that will trigger and regulate a series of events including protein phosphorylation, in a time-dependent fashion. The identity of the sperm oxidase responsible for the production of ROS involved in capacitation is still elusive, and several candidates are discussed in this review. Interestingly, ROS-induced ROS formation has been described during human sperm capacitation. Redox signaling during capacitation is associated with changes in thiol groups of proteins located on the plasma membrane and subcellular compartments of the spermatozoon. Both, oxidation of thiols forming disulfide bridges and the increase on thiol content are necessary to regulate different sperm proteins associated with capacitation. Reducing equivalents such as NADH and NADPH are necessary to support capacitation in many species including humans. Lactate dehydrogenase, glucose-6-phospohate dehydrogenase, and isocitrate dehydrogenase are responsible in supplying NAD (P) H for sperm capacitation. Peroxiredoxins (PRDXs) are newly described enzymes with antioxidant properties that can protect mammalian spermatozoa; however, they are also candidates for assuring the regulation of redox signaling required for sperm capacitation. The dysregulation of PRDXs and of enzymes needed for their reactivation such as thioredoxin/thioredoxin reductase system and glutathione-S-transferases impairs sperm motility, capacitation, and promotes DNA damage in spermatozoa leading to male infertility. PMID:25926608

  4. Optical MEMS for Earth observation

    Science.gov (United States)

    Liotard, Arnaud; Viard, Thierry; Noell, Wilfried; Zamkotsian, Frédéric; Freire, Marco; Guldimann, Benedikt; Kraft, Stefan

    2017-11-01

    Due to the relatively large number of optical Earth Observation missions at ESA, this area is interesting for new space technology developments. In addition to their compactness, scalability and specific task customization, optical MEMS could generate new functions not available with current technologies and are thus candidates for the design of future space instruments. Most mature components for space applications are the digital mirror arrays, the micro-deformable mirrors, the programmable micro diffraction gratings and tiltable micromirrors. A first selection of market-pull and techno-push concepts is done. In addition, some concepts are coming from outside Earth Observation. Finally two concepts are more deeply analyzed. The first concept is a programmable slit for straylight control for space spectro-imagers. This instrument is a push-broom spectroimager for which some images cannot be exploited because of bright sources in the field-of-view. The proposed concept consists in replacing the current entrance spectrometer slit by an active row of micro-mirrors. The MEMS will permit to dynamically remove the bright sources and then to obtain a field-of-view with an optically enhanced signal-to-noise ratio. The second concept is a push-broom imager for which the acquired spectrum can be tuned by optical MEMS. This system is composed of two diffractive elements and a digital mirror array. The first diffractive element spreads the spectrum. A micromirror array is set at the location of the spectral focal plane. By putting the micro-mirrors ON or OFF, we can select parts of field-of-view or spectrum. The second diffractive element then recombines the light on a push-broom detector. Dichroics filters, strip filter, band-pass filter could be replaced by a unique instrument.

  5. Development of MEMS photoacoustic spectroscopy

    Energy Technology Data Exchange (ETDEWEB)

    Robinson, Alex Lockwood; Eichenfield, Matthew S.; Griffin, Benjamin; Harvey, Heidi Alyssa; Nielson, Gregory N.; Okandan, Murat; Langlois, Eric; Resnick, Paul James; Shaw, Michael J.; Young, Ian; Givler, Richard C.; Reinke, Charles M.

    2014-01-01

    After years in the field, many materials suffer degradation, off-gassing, and chemical changes causing build-up of measurable chemical atmospheres. Stand-alone embedded chemical sensors are typically limited in specificity, require electrical lines, and/or calibration drift makes data reliability questionable. Along with size, these "Achilles' heels" have prevented incorporation of gas sensing into sealed, hazardous locations which would highly benefit from in-situ analysis. We report on development of an all-optical, mid-IR, fiber-optic based MEMS Photoacoustic Spectroscopy solution to address these limitations. Concurrent modeling and computational simulation are used to guide hardware design and implementation.

  6. Recognition of In-Ear Microphone Speech Data Using Multi-Layer Neural Networks

    National Research Council Canada - National Science Library

    Bulbuller, Gokhan

    2006-01-01

    .... In this study, a speech recognition system is presented, specifically an isolated word recognizer which uses speech collected from the external auditory canals of the subjects via an in-ear microphone...

  7. Design of UAV-Embedded Microphone Array System for Sound Source Localization in Outdoor Environments.

    Science.gov (United States)

    Hoshiba, Kotaro; Washizaki, Kai; Wakabayashi, Mizuho; Ishiki, Takahiro; Kumon, Makoto; Bando, Yoshiaki; Gabriel, Daniel; Nakadai, Kazuhiro; Okuno, Hiroshi G

    2017-11-03

    In search and rescue activities, unmanned aerial vehicles (UAV) should exploit sound information to compensate for poor visual information. This paper describes the design and implementation of a UAV-embedded microphone array system for sound source localization in outdoor environments. Four critical development problems included water-resistance of the microphone array, efficiency in assembling, reliability of wireless communication, and sufficiency of visualization tools for operators. To solve these problems, we developed a spherical microphone array system (SMAS) consisting of a microphone array, a stable wireless network communication system, and intuitive visualization tools. The performance of SMAS was evaluated with simulated data and a demonstration in the field. Results confirmed that the SMAS provides highly accurate localization, water resistance, prompt assembly, stable wireless communication, and intuitive information for observers and operators.

  8. Sound-field reconstruction performance of a mixed-order Ambisonics microphone array

    DEFF Research Database (Denmark)

    Marschall, Marton; Chang, Jiho

    2013-01-01

    Recently, there has been increasing interest in using spherical microphone arrays for spatial audio recordings. Accurate recordings are important for a range of applications, from virtual sound environments for hearing research through to the evaluation of communication devices, such as hearing...... instruments and mobile phones. Previously, a mixed-order Ambisonics (MOA) approach was proposed to improve the horizontal spatial resolution of spherical arrays. This was achieved by increasing the number of microphones near the horizontal plane while keeping the total number of transducers fixed...... microphone were used to simulate self-noise, sensitivity, and phase response variations between the microphones. To quantify the reconstruction error and the "sweet area" as a function of source elevation, the reconstructed sound field based on a simulated array measurement was compared to the reference...

  9. 78 FR 21977 - Certain Silicon Microphone Packages and Products Containing the Same; Commission Determination...

    Science.gov (United States)

    2013-04-12

    ... From the Federal Register Online via the Government Publishing Office INTERNATIONAL TRADE COMMISSION Certain Silicon Microphone Packages and Products Containing the Same; Commission Determination Not To Review an Initial Determination Terminating Investigation Based on a Settlement Agreement...

  10. Design Considerations When Accelerating an FPGA-Based Digital Microphone Array for Sound-Source Localization

    Directory of Open Access Journals (Sweden)

    Bruno da Silva

    2017-01-01

    Full Text Available The use of microphone arrays for sound-source localization is a well-researched topic. The response of such sensor arrays is dependent on the quantity of microphones operating on the array. A higher number of microphones, however, increase the computational demand, making real-time response challenging. In this paper, we present a Filter-and-Sum based architecture and several acceleration techniques to provide accurate sound-source localization in real-time. Experiments demonstrate how an accurate sound-source localization is obtained in a couple of milliseconds, independently of the number of microphones. Finally, we also propose different strategies to further accelerate the sound-source localization while offering increased angular resolution.

  11. Design of UAV-Embedded Microphone Array System for Sound Source Localization in Outdoor Environments †

    Science.gov (United States)

    Hoshiba, Kotaro; Washizaki, Kai; Wakabayashi, Mizuho; Ishiki, Takahiro; Bando, Yoshiaki; Gabriel, Daniel; Nakadai, Kazuhiro; Okuno, Hiroshi G.

    2017-01-01

    In search and rescue activities, unmanned aerial vehicles (UAV) should exploit sound information to compensate for poor visual information. This paper describes the design and implementation of a UAV-embedded microphone array system for sound source localization in outdoor environments. Four critical development problems included water-resistance of the microphone array, efficiency in assembling, reliability of wireless communication, and sufficiency of visualization tools for operators. To solve these problems, we developed a spherical microphone array system (SMAS) consisting of a microphone array, a stable wireless network communication system, and intuitive visualization tools. The performance of SMAS was evaluated with simulated data and a demonstration in the field. Results confirmed that the SMAS provides highly accurate localization, water resistance, prompt assembly, stable wireless communication, and intuitive information for observers and operators. PMID:29099790

  12. Design of UAV-Embedded Microphone Array System for Sound Source Localization in Outdoor Environments

    Directory of Open Access Journals (Sweden)

    Kotaro Hoshiba

    2017-11-01

    Full Text Available In search and rescue activities, unmanned aerial vehicles (UAV should exploit sound information to compensate for poor visual information. This paper describes the design and implementation of a UAV-embedded microphone array system for sound source localization in outdoor environments. Four critical development problems included water-resistance of the microphone array, efficiency in assembling, reliability of wireless communication, and sufficiency of visualization tools for operators. To solve these problems, we developed a spherical microphone array system (SMAS consisting of a microphone array, a stable wireless network communication system, and intuitive visualization tools. The performance of SMAS was evaluated with simulated data and a demonstration in the field. Results confirmed that the SMAS provides highly accurate localization, water resistance, prompt assembly, stable wireless communication, and intuitive information for observers and operators.

  13. Micro electromechanical systems (MEMS) for mechanical engineers

    Energy Technology Data Exchange (ETDEWEB)

    Lee, A. P., LLNL

    1996-11-18

    The ongoing advances in Microelectromechanical Systems (MEMS) are providing man-kind the freedom to travel to dimensional spaces never before conceivable. Advances include new fabrication processes, new materials, tailored modeling tools, new fabrication machines, systems integration, and more detailed studies of physics and surface chemistry as applied to the micro scale. In the ten years since its inauguration, MEMS technology is penetrating industries of automobile, healthcare, biotechnology, sports/entertainment, measurement systems, data storage, photonics/optics, computer, aerospace, precision instruments/robotics, and environment monitoring. It is projected that by the turn of the century, MEMS will impact every individual in the industrial world, totaling sales up to $14 billion (source: System Planning Corp.). MEMS programs in major universities have spawned up all over the United States, preparing the brain-power and expertise for the next wave of MEMS breakthroughs. It should be pointed out that although MEMS has been initiated by electrical engineering researchers through the involvement of IC fabrication techniques, today it has evolved such that it requires a totally multi-disciplinary team to develop useful devices. Mechanical engineers are especially crucial to the success of MEMS development, since 90% of the physical realm involved is mechanical. Mechanical engineers are needed for the design of MEMS, the analysis of the mechanical system, the design of testing apparatus, the implementation of analytical tools, and the packaging process. Every single aspect of mechanical engineering is being utilized in the MEMS field today, however, the impact could be more substantial if more mechanical engineers are involved in the systems level designing. In this paper, an attempt is made to create the pathways for a mechanical engineer to enter in the MEMS field. Examples of application in optics and medical devices will be used to illustrate how mechanical

  14. A 33fJ/Step SAR Capacitance-to-Digital Converter Using a Chain of Inverter-Based Amplifiers

    KAUST Repository

    Omran, Hesham

    2016-11-16

    A 12 - bit energy-efficient capacitive sensor interface circuit that fully relies on capacitance-domain successive approximation (SAR) technique is presented. Analysis shows that for SAR capacitance-to-digital converter (CDC) comparator offset voltage will result in parasitic-dependent conversion errors, which necessitates using an offset cancellation technique. Based on the presented analysis, a SAR CDC that uses a chain of cascode inverter-based amplifiers with near-threshold biasing is proposed to provide robust, energy-efficient, and fast operation. A hybrid coarse-fine capacitive digital-to-analog converter (CapDAC) achieves 11.7 - bit effective resolution, and provides 83% area saving compared to a conventional binary weighted implementation. The prototype fabricated in a 0.18μm CMOS technology is experimentally verified using MEMS capacitive pressure sensor. Experimental results show an energy efficiency figure-of-merit (FoM) of 33 f J/Step which outperforms the state-of-the-art. The CDC output is insensitive to analog references; thus, a very low temperature sensitivity of 2.3 ppm/°C is achieved without the need for calibration.

  15. A novel multi-level IC-compatible surface microfabrication technology for MEMS with independently controlled lateral and vertical submicron transduction gaps

    Science.gov (United States)

    Cicek, Paul-Vahe; Elsayed, Mohannad; Nabki, Frederic; El-Gamal, Mourad

    2017-11-01

    An above-IC compatible multi-level MEMS surface microfabrication technology based on a silicon carbide structural layer is presented. The fabrication process flow provides optimal electrostatic transduction by allowing the creation of independently controlled submicron vertical and lateral gaps without the need for high resolution lithography. Adopting silicon carbide as the structural material, the technology ensures material, chemical and thermal compatibility with modern semiconductor nodes, reporting the lowest peak processing temperature (i.e. 200 °C) of all comparable works. This makes this process ideally suited for integrating capacitive-based MEMS directly above standard CMOS substrates. Process flow design and optimization are presented in the context of bulk-mode disk resonators, devices that are shown to exhibit improved performance with respect to previous generation flexural beam resonators, and that represent relatively complex MEMS structures. The impact of impending improvements to the fabrication technology is discussed.

  16. Measurement of the quantum capacitance of graphene.

    Science.gov (United States)

    Xia, Jilin; Chen, Fang; Li, Jinghong; Tao, Nongjian

    2009-08-01

    Graphene has received widespread attention due to its unique electronic properties. Much of the research conducted so far has focused on electron mobility, which is determined by scattering from charged impurities and other inhomogeneities. However, another important quantity, the quantum capacitance, has been largely overlooked. Here, we report a direct measurement of the quantum capacitance of graphene as a function of gate potential using a three-electrode electrochemical configuration. The quantum capacitance has a non-zero minimum at the Dirac point and a linear increase on both sides of the minimum with relatively small slopes. Our findings -- which are not predicted by theory for ideal graphene -- suggest that charged impurities also influences the quantum capacitance. We also measured the capacitance in aqueous solutions at different ionic concentrations, and our results strongly indicate that the long-standing puzzle about the interfacial capacitance in carbon-based electrodes has a quantum origin.

  17. Speech perception comparisons using an implanted and an external microphone in existing cochlear implant users.

    Science.gov (United States)

    Jenkins, Herman A; Uhler, Kristin

    2012-01-01

    To compare the speech understanding abilities of cochlear implant listeners using 2 microphone technologies, the Otologics fully implantable Carina and the Cochlear Freedom microphones. Feasibility study using direct comparison of the 2 microphones, nonrandomized and nonblinded within case studies. Tertiary referral center hospital outpatient clinic. Four subjects with greater than 1 year of unilateral listening experience with the Freedom Cochlear Implant and a CNC word score higher than 40%. A Carina microphone coupled to a percutaneous plug was implanted on the ipsilateral side of the cochlear implant. Two months were allowed for healing before connecting to the Carina microphone. The percutaneous plug was connected to a body worn external processor with output leads inserted into the auxiliary port of the Freedom processor. Subjects were instructed to use each of the 2 microphones for half of their daily implant use. Aided pure tone thresholds, consonant-nucleus-consonant (CNC), Bamford-Kowel-Bench Speech in Noise test (BKN-SIN), and Abbreviated Profile of Hearing Aid Benefit. All subjects had sound perceptions using both microphones. The loudness and quality of the sound was judged to be poorer with the Carina in the first 2 subjects. The latter 2 demonstrated essential equivalence in the second two listeners, with the exception of the Abbreviated Profile of Hearing Aid Benefit reporting greater percentage of problems for the Carina in the background noise situation for subject 0011-003PP. CNC word scores were better with the Freedom than the Carina in all 4 subjects. The latter 2 showed improved speech perception abilities with the Carina, compared with the first 2. The BKB-SIN showed consistently better results with the Freedom in noise. Early observations indicate that it is potentially feasible to use the fully implanted Carina microphone with the Freedom Cochlear Implant. The authors would anticipate that outcomes would improve as more knowledge is gained

  18. Optical-fiber-interconnected MEMS sensors and actuators

    Science.gov (United States)

    Miller, Michael B.; Meller, Scott A.; Wavering, Thomas A.; Greene, Jonathan A.; Murphy, Kent A.

    1998-07-01

    Microelectromechanical systems or MEMS are miniature devices that have several advantages over conventional sensing and actuating technology. MEMS devices benefit form well developed integrated circuit production methods which ensure high volume, high yield processes that create low-cost sensors and actuators. OPtical fiber interconnected MEMS will provide new functionality in MEMS devices such as multiplexed operation for distributed sensing applications. This paper presents approaches in optical fiber to MEMS interfacing and some preliminary results.

  19. Noise properties of textile, capacitive EEG electrodes

    OpenAIRE

    Asl Sara Nazari; Ludwig Frank; Schilling Meinhard

    2015-01-01

    The rigid surface of the conventional PCB-based capacitive electrode produces an undefined distance between the skin and the electrode surface. Therefore, the capacitance introduced by them is uncertain and can vary from electrode to electrode due to their different positions on the scalp. However, textile electrodes which use conductive fabric as electrode surfaces, are bendable over the scalp. Therefore, it provides a certain value of the capacitance which is predictable and calculable accu...

  20. Flexible PVDF ferroelectric capacitive temperature sensor

    KAUST Repository

    Khan, Naveed

    2015-08-02

    In this paper, a capacitive temperature sensor based on polyvinylidene fluoride (PVDF) capacitor is explored. The PVDF capacitor is characterized below its Curie temperature. The capacitance of the PVDF capacitor changes vs temperature with a sensitivity of 16pF/°C. The linearity measurement of the capacitance-temperature relation shows less than 0.7°C error from a best fit straight line. An LC oscillator based temperature sensor is demonstrated based on this capacitor.

  1. Capacitive level meter for liquid hydrogen

    OpenAIRE

    Matsumoto, Koichi; Sobue, Masamitsu; Asamoto, Kai; Nishimura, Yuta; Abe, Satoshi; Numazawa, Takenori

    2011-01-01

    A capacitive level meter working at low temperatures was made to use in magnetic refrigerator for hydrogen liquefaction. The liquid level was measured from the capacitance between parallel electrodes immersed in the liquid. The meter was tested for liquid nitrogen, hydrogen, and helium. The operation was successful using an AC capacitance bridge. The estimated sensitivity of the meter is better than 0.2 mm for liquid hydrogen. The meter also worked with pressurized hydrogen. © 2010.

  2. A CMOS-MEMS arrayed resonant-gate field effect transistor (RGFET) oscillator

    Science.gov (United States)

    Chin, Chi-Hang; Li, Ming-Huang; Chen, Chao-Yu; Wang, Yu-Lin; Li, Sheng-Shian

    2015-11-01

    A high-frequency CMOS-MEMS arrayed resonant-gate field effect transistor (RGFET) fabricated by a standard 0.35 μm 2-poly-4-metal CMOS-MEMS platform is implemented to enable a Pierce-type oscillator. The proposed arrayed RGFET exhibits low motional impedance of only 5 kΩ under a purely capacitive transduction and decent power handling capability. With such features, the implemented oscillator shows impressive phase noise of  -117 dBc Hz-1 at the far-from-carrier offset (1 MHz). In this work, we design a clamped-clamped beam (CCB) arrayed resonator utilizing a high-velocity mechanical coupling scheme to serve as the resonant-gate array. To achieve a functional arrayed RGFET, a corresponding FET array is directly placed underneath the resonant gate array to convert the motional current on the resonant-gate array into a voltage output with a tunable transconductance gain. To understand the behavior of the proposed device, an equivalent circuit model consisting of the resonant unit and FET is also provided. To verify the effects of the post-CMOS process on device performance, a conventional MOS I D current measurement is carried out. Finally, a CMOS-MEMS arrayed RGFET oscillator is realized by utilizing a Pierce oscillator architecture, showing decent phase noise performance that benefits from the array design to alleviate the nonlinear effect of the resonant gate.

  3. Design of Surface Micromachined Compliant MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Bradley, Joe Anthony [Iowa State Univ., Ames, IA (United States)

    2002-12-31

    The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a micro-compliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMs, most have used comb-drive actuation methods and bulk micromachining processes. This research focused on fully-compliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms.

  4. Design of Surface micromachined Compliant MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Bradley, Joe Anthony [Iowa State Univ., Ames, IA (United States)

    2001-01-01

    The consideration of compliant mechanisms as Microelectromechanical Systems (MEMS) is the focus of this research endeavor. MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a micro-compliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMS, most have used comb-drive actuation methods and bulk micromachining processes. This research focuses on fully-compliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms.

  5. Optical inspection of hidden MEMS structures

    Science.gov (United States)

    Krauter, Johann; Gronle, Marc; Osten, Wolfgang

    2017-06-01

    Micro-electro-mechanical system's (MEMS) applications have greatly expanded over the recent years, and the MEMS industry has grown almost exponentially. One of the strongest drivers are the automotive and consumer markets. A 100% test is necessary especially in the production of automotive MEMS sensors since they are subject to safety relevant functions. This inspection should be carried out before dicing and packaging since more than 90% of the production costs are incurred during these steps. An electrical test is currently being carried out with each MEMS component. In the case of a malfunction, the defect can not be located on the wafer because the MEMS are no longer optically accessible due to the encapsulation. This paper presents a low coherence interferometer for the topography measurement of MEMS structures located within the wafer stack. Here, a high axial and lateral resolution is necessary to identify defects such as stuck or bent MEMS fingers. First, the boundary conditions for an optical inspection system will be discussed. The setup is then shown with some exemplary measurements.

  6. Real-time Identification of Respiratory Movements through a Microphone

    Directory of Open Access Journals (Sweden)

    Juan CASTRO

    2015-05-01

    Full Text Available This work presents a software application to identify, in real time, the respiratory movements -inspiration and expiration- through a microphone. The application, which has been developed in Matlab and named ASBSLAB for the GUI version and ASBSLABCONSOLE for the command-line version, is the result of a research and experimentation process. A total of 48 minutes of breathing movements from four subjects was recorded and 18 acoustic features were extracted to generate the data model. A first level of identification, based on the classification of tiny audio segments, was designed using kNN supervised method. The second level of identification implements a state machine that takes the results ordered in the time from kNN as input and identifies the whole respiratory movement, achieving a level of positive identifications above 95%. As computation time is a handicap, the application let the user choose easily the sample rate, the audio segment size and the set of acoustic features to use in the identification process. In addition, based on the number of features selected, this works suggests those that achieve best results.

  7. Sleep estimates using microelectromechanical systems (MEMS).

    Science.gov (United States)

    te Lindert, Bart H W; Van Someren, Eus J W

    2013-05-01

    Although currently more affordable than polysomnography, actigraphic sleep estimates have disadvantages. Brand-specific differences in data reduction impede pooling of data in large-scale cohorts and may not fully exploit movement information. Sleep estimate reliability might improve by advanced analyses of three-axial, linear accelerometry data sampled at a high rate, which is now feasible using microelectromechanical systems (MEMS). However, it might take some time before these analyses become available. To provide ongoing studies with backward compatibility while already switching from actigraphy to MEMS accelerometry, we designed and validated a method to transform accelerometry data into the traditional actigraphic movement counts, thus allowing for the use of validated algorithms to estimate sleep parameters. Simultaneous actigraphy and MEMS-accelerometry recording. Home, unrestrained. Fifteen healthy adults (23-36 y, 10 males, 5 females). None. Actigraphic movement counts/15-sec and 50-Hz digitized MEMS-accelerometry. Passing-Bablok regression optimized transformation of MEMS-accelerometry signals to movement counts. Kappa statistics calculated agreement between individual epochs scored as wake or sleep. Bland-Altman plots evaluated reliability of common sleep variables both between and within actigraphs and MEMS-accelerometers. Agreement between epochs was almost perfect at the low, medium, and high threshold (kappa = 0.87 ± 0.05, 0.85 ± 0.06, and 0.83 ± 0.07). Sleep parameter agreement was better between two MEMS-accelerometers or a MEMS-accelerometer and an actigraph than between two actigraphs. The algorithm allows for continuity of outcome parameters in ongoing actigraphy studies that consider switching to MEMS-accelerometers. Its implementation makes backward compatibility feasible, while collecting raw data that, in time, could provide better sleep estimates and promote cross-study data pooling.

  8. Adhesion aspects in MEMS/NEMS

    CERN Document Server

    Kim, Seong H; Mittal, Kash L

    2012-01-01

    Phenomena associated with the adhesion interaction of surfaces have been a critical aspect of micro- and nanosystem development and performance since the first MicroElectroMechanicalSystems(MEMS) were fabricated. These phenomena are ubiquitous in nature and are present in all systems, however MEMS devices are particularly sensitive to their effects owing to their small size and limited actuation force that can be generated. Extension of MEMS technology concepts to the nanoscale and development of NanoElectroMechanicalSystems(NEMS) will result in systems even more strongly influenced by surface

  9. Practical guide to RF-MEMS

    CERN Document Server

    Iannacci, Jacopo

    2013-01-01

    Closes the gap between hardcore-theoretical and purely experimental RF-MEMS books. The book covers, from a practical viewpoint, the most critical steps that have to be taken in order to develop novel RF-MEMS device concepts. Prototypical RF-MEMS devices, both including lumped components and complex networks, are presented at the beginning of the book as reference examples, and these are then discussed from different perspectives with regard to design, simulation, packaging, testing, and post-fabrication modeling. Theoretical concepts are introduced when necessary to complement the practical

  10. A new interface weak-capacitance detection ASIC of capacitive liquid level sensor in the rocket

    Science.gov (United States)

    Yin, Liang; Qin, Yao; Liu, Xiao-Wei

    2017-11-01

    A new capacitive liquid level sensing interface weak-capacitance detection ASIC has been designed. This ASIC realized the detection of the output capacitance of the capacitive liquid level sensor, which converts the output capacitance of the capacitive liquid level sensor to voltage. The chip is fabricated in a standard 0.5μm CMOS process. The test results show that the linearity of capacitance detection of the ASIC is 0.05%, output noise is 3.7aF/Hz (when the capacitance which will be detected is 40 pF), the stability of capacitance detection is 7.4 × 10-5pF (1σ, 1h), the output zero position temperature coefficient is 4.5 uV/∘C. The test results prove that this interface ASIC can meet the requirement of high accuracy capacitance detection. Therefore, this interface ASIC can be applied in capacitive liquid level sensing and capacitive humidity sensing field.

  11. Capacitive Feedthroughs for Medical Implants.

    Science.gov (United States)

    Grob, Sven; Tass, Peter A; Hauptmann, Christian

    2016-01-01

    Important technological advances in the last decades paved the road to a great success story for electrically stimulating medical implants, including cochlear implants or implants for deep brain stimulation. However, there are still many challenges in reducing side effects and improving functionality and comfort for the patient. Two of the main challenges are the wish for smaller implants on one hand, and the demand for more stimulation channels on the other hand. But these two aims lead to a conflict of interests. This paper presents a novel design for an electrical feedthrough, the so called capacitive feedthrough, which allows both reducing the size, and increasing the number of included channels. Capacitive feedthroughs combine the functionality of a coupling capacitor and an electrical feedthrough within one and the same structure. The paper also discusses the progress and the challenges of the first produced demonstrators. The concept bears a high potential in improving current feedthrough technology, and could be applied on all kinds of electrical medical implants, even if its implementation might be challenging.

  12. Capacitive feedthroughs for medical implants

    Directory of Open Access Journals (Sweden)

    Sven Grob

    2016-09-01

    Full Text Available Important technological advances in the last decades paved the way for a great success story for electrically stimulating medical implants, including cochlear implants or implants for deep brain stimulation. However, there are still many challenges in reducing side effects and improving functionality and comfort for the patient. Two of the main challenges are the wish for smaller implants on one hand, and the demand for more stimulation channels on the other hand. But these two aims lead to a conflict of interests. This paper presents a novel design for an electrical feedthrough, the so called capacitive feedthrough, which allows both reducing the size and increasing the number of included channels. Capacitive feedthroughs include the functionality of a coupling capacitor and an electrical feedthrough within one and the same structure. The paper also discusses the progress and the challenges of the first produced test structures. The concept bears a high potential in improving current feedthrough technology, and could be applied for all kinds of electrical medical implants.

  13. Long-term RF burn-in effects on dielectric charging of MEMS capacitive switches

    KAUST Repository

    Molinero, David G.

    2013-03-01

    This paper experimentally quantified the long-term effects of RF burn-in, in terms of burn-in and recovery times, and found the effects to be semipermanent. Specifically, most of the benefit could be realized after approximately 20 min of RF burn-in, which would then last for several months. Additionally, since similar effects were observed on both real and faux switches, the effects appeared to be of electrical rather than mechanical nature. These encouraging results should facilitate the application of the switches in RF systems, where high RF power could be periodically applied to rejuvenate the switches. © 2001-2011 IEEE.

  14. RF MEMS Based Tunable Bandpass Filter For X-Band Applications

    Science.gov (United States)

    Chaubey, Mahesh Kumar; Bhadauria, Avanish

    2018-03-01

    In this paper, we present the design and simulation of RF MEMS based Tunable combline band pass filters for X-band applications at different substrate thicknesses and studied the effect of thickness on tuning. The proposed filters are designed on high resistive silicon substrate of 500µm and 300 thicknesses. The tunability is achieved by using MEMS based varacter replaced with fix capacitor in conventional combline filter. First, the microstrip combline filter is designed at the centre frequency of 9.5 GHz and then tuning is achieved by varying the capacitance in the designed combline filters. The electromagnetic simulation has been carried out using HFSS v15 software based on finite element method (FEM). The tuning of the filter on silicon substrate of 500 μm is achieved by changing the capacitance value from 0.2035 pF to 0.4035 pF in the model in HFSS, which resulted the tuning in the frequency range of 7.85 to 10.35GHz. Insertion loss of design filter is in the range of 1dB within the tuning range. In case of substrate thickness 300 μm the tuning of the filter is achieved by changing the capacitance value from 0.293 pF to 0.403 pF in the model in HFSS, which resulted the tuning in the frequency range of 8.80 to 9.90 GHz. Insertion loss of design filter is in the range of ∼1.2dB within the tuning range.

  15. Performance and characterization of a MEMS-based device for alignment and manipulation of x-ray nanofocusing optics

    Directory of Open Access Journals (Sweden)

    Weihe Xu

    2015-03-01

    Full Text Available X-ray microscopy is a powerful, non-invasive tool used for nanometer-scale resolution imaging, and it is widely applied in various areas of science and technology. To push the spatial resolution of x-ray microscopy studies in the hard x-ray regime below 10 nm, Multilayer Laue Lenses (MLL can be used as nanofocusing elements. To ensure distortion-free x-ray imaging, high-stability microscopy systems are required. MEMS-based manipulators are a promising route to achieve high stability when used for alignment and manipulation of nanofocusing optics. In this work, we present a tip-tilt MEMS-based device suitable for MLL alignment. We fully characterize the device and demonstrate better-than 10 millidegree angular positioning resolution when utilizing capacitive displacement sensors, and better-than 0.8 millidegree resolution when using laser interferometry.

  16. MEMS-based Circuits and Systems for Wireless Communication

    CERN Document Server

    Kaiser, Andreas

    2013-01-01

    MEMS-based Circuits and Systems for Wireless Communication provides comprehensive coverage of RF-MEMS technology from device to system level. This edited volume places emphasis on how system performance for radio frequency applications can be leveraged by Micro-Electro-Mechanical Systems (MEMS). Coverage also extends to innovative MEMS-aware radio architectures that push the potential of MEMS technology further ahead.  This work presents a broad overview of the technology from MEMS devices (mainly BAW and Si MEMS resonators) to basic circuits, such as oscillators and filters, and finally complete systems such as ultra-low-power MEMS-based radios. Contributions from leading experts around the world are organized in three parts. Part I introduces RF-MEMS technology, devices and modeling and includes a prospective outlook on ongoing developments towards Nano-Electro-Mechanical Systems (NEMS) and phononic crystals. Device properties and models are presented in a circuit oriented perspective. Part II focusses on ...

  17. Optical MEMS for chemical analysis and biomedicine

    CERN Document Server

    Jiang, Hongrui

    2016-01-01

    This book describes the current state of optical MEMS in chemical and biomedical analysis and brings together current trends and highlights topics representing the most exciting progress in recent years in the field.

  18. Advanced mechatronics and MEMS devices II

    CERN Document Server

    Wei, Bin

    2017-01-01

    This book introduces the state-of-the-art technologies in mechatronics, robotics, and MEMS devices in order to improve their methodologies. It provides a follow-up to "Advanced Mechatronics and MEMS Devices" (2013) with an exploration of the most up-to-date technologies and their applications, shown through examples that give readers insights and lessons learned from actual projects. Researchers on mechatronics, robotics, and MEMS as well as graduate students in mechanical engineering will find chapters on: Fundamental design and working principles on MEMS accelerometers Innovative mobile technologies Force/tactile sensors development Control schemes for reconfigurable robotic systems Inertial microfluidics Piezoelectric force sensors and dynamic calibration techniques ...And more. Authors explore applications in the areas of agriculture, biomedicine, advanced manufacturing, and space. Micro-assembly for current and future industries is also considered, as well as the design and development of micro and intel...

  19. MEMS and Nano-Technology Clean Room

    Data.gov (United States)

    Federal Laboratory Consortium — The MEMS and Nano-Technology Clean Room is a state-of-the-art, 800 square foot, Class 1000-capable facility used for development of micro and sub-micro scale sensors...

  20. Wireless MEMs BioSensor, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — Crossfield is proposing to develop a low cost, single chip plant bio-monitor using an embedded MEMs based infrared (IR) spectroscopy gas sensor for carbon dioxide...

  1. MEMS Gyroscope with Interferometric Detection, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — This SBIR Phase I project will develop a MEMS gyroscope that uses an ultra high resolution sensing technique for measuring proof mass motion. The goal is to...

  2. Cryogenic MEMS Pressure Sensor, Phase I

    Data.gov (United States)

    National Aeronautics and Space Administration — A directly immersible cryogenic MEMS pressure sensor will be developed. Each silicon die will contain a vacuum-reference and a tent-like membrane. Offsetting thermal...

  3. MEMS Gyroscope with Interferometric Detection, Phase II

    Data.gov (United States)

    National Aeronautics and Space Administration — The proposed innovation is a novel MEMS gyroscope that uses micro-interferometric detection to measure the motion of the proof mass. Using an interferometric...

  4. Wireless MEMs BioSensor Project

    Data.gov (United States)

    National Aeronautics and Space Administration — Crossfield is proposing to develop a low cost, single chip plant bio-monitor using an embedded MEMs based infrared (IR) spectroscopy gas sensor for carbon dioxide...

  5. MEMS Shutter for Spectrometer Calibration Project

    Data.gov (United States)

    National Aeronautics and Space Administration —   We shall develop a MEMS shutter that is expected to have 2-3 g mass and consumeThis research will demonstrate fabrication of a low mass (~2-3 grams), low...

  6. SiC MEMS For Harsh Environments

    National Research Council Canada - National Science Library

    Bradley, Kenneth

    2003-01-01

    ... (specifically high temperature) material for both structural and electronic devices. Although shock testing of SiC MEMS devices under this program was not accomplished, subsequent work allowed for this testing to occur, with positive results...

  7. MEMS Sensors and Actuators Laboratory (MSAL)

    Data.gov (United States)

    Federal Laboratory Consortium — The MEMS Sensors and Actuators Laboratory (MSAL) in the A.J. Clark School of Engineering at the University of Maryland (UMD) was established in January 2000. Our lab...

  8. Fabrication of integrated metallic MEMS devices

    DEFF Research Database (Denmark)

    Yalcinkaya, Arda Deniz; Ravnkilde, Jan Tue; Hansen, Ole

    2002-01-01

    A simple and complementary metal oxide semiconductor (CMOS) compatible fabrication technique for microelectromechanical (MEMS) devices is presented. The fabrication technology makes use of electroplated metal layers. Among the fabricated devices, high quality factor microresonators...

  9. Picometer-Resolution MEMS Segmented DM Project

    Data.gov (United States)

    National Aeronautics and Space Administration — Microelectromechanical systems (MEMS) technology has the potential to create deformable mirrors (DM) with 10^4 actuators that have size, weight, and power...

  10. The pyramidal capacitated vehicle routing problem

    DEFF Research Database (Denmark)

    Lysgaard, Jens

    2010-01-01

    This paper introduces the pyramidal capacitated vehicle routing problem (PCVRP) as a restricted version of the capacitated vehicle routing problem (CVRP). In the PCVRP each route is required to be pyramidal in a sense generalized from the pyramidal traveling salesman problem (PTSP). A pyramidal...

  11. Characterization of Textile-Insulated Capacitive Biosensors

    Directory of Open Access Journals (Sweden)

    Charn Loong Ng

    2017-03-01

    Full Text Available Capacitive biosensors are an emerging technology revolutionizing wearable sensing systems and personal healthcare devices. They are capable of continuously measuring bioelectrical signals from the human body while utilizing textiles as an insulator. Different textile types have their own unique properties that alter skin-electrode capacitance and the performance of capacitive biosensors. This paper aims to identify the best textile insulator to be used with capacitive biosensors by analysing the characteristics of 6 types of common textile materials (cotton, linen, rayon, nylon, polyester, and PVC-textile while evaluating their impact on the performance of a capacitive biosensor. A textile-insulated capacitive (TEX-C biosensor was developed and validated on 3 subjects. Experimental results revealed that higher skin-electrode capacitance of a TEX-C biosensor yields a lower noise floor and better signal quality. Natural fabric such as cotton and linen were the two best insulating materials to integrate with a capacitive biosensor. They yielded the lowest noise floor of 2 mV and achieved consistent electromyography (EMG signals measurements throughout the performance test.

  12. Characterization of Textile-Insulated Capacitive Biosensors

    Science.gov (United States)

    Ng, Charn Loong; Reaz, Mamun Bin Ibne

    2017-01-01

    Capacitive biosensors are an emerging technology revolutionizing wearable sensing systems and personal healthcare devices. They are capable of continuously measuring bioelectrical signals from the human body while utilizing textiles as an insulator. Different textile types have their own unique properties that alter skin-electrode capacitance and the performance of capacitive biosensors. This paper aims to identify the best textile insulator to be used with capacitive biosensors by analysing the characteristics of 6 types of common textile materials (cotton, linen, rayon, nylon, polyester, and PVC-textile) while evaluating their impact on the performance of a capacitive biosensor. A textile-insulated capacitive (TEX-C) biosensor was developed and validated on 3 subjects. Experimental results revealed that higher skin-electrode capacitance of a TEX-C biosensor yields a lower noise floor and better signal quality. Natural fabric such as cotton and linen were the two best insulating materials to integrate with a capacitive biosensor. They yielded the lowest noise floor of 2 mV and achieved consistent electromyography (EMG) signals measurements throughout the performance test. PMID:28287493

  13. The Pyramidal Capacitated Vehicle Routing Problem

    DEFF Research Database (Denmark)

    Lysgaard, Jens

    This paper introduces the Pyramidal Capacitated Vehicle Routing Problem (PCVRP) as a restricted version of the Capacitated Vehicle Routing Problem (CVRP). In the PCVRP each route is required to be pyramidal in a sense generalized from the Pyramidal Traveling Salesman Problem (PTSP). A pyramidal...

  14. An Analytical Method to Determine the Response of a Micro Capacitive Pressure Sensor

    Directory of Open Access Journals (Sweden)

    Ashwin Simha

    2011-07-01

    Full Text Available The response of a capacitive pressure sensor is generally represented by a fourth order partial differential equation which is complex to solve and does not possess an exact solution. Several attempts have been made earlier through various techniques such as the Galerkin method, Finite Difference Method etc. In this paper an attempt has been made to develop a simple approximate analytical approach to determine the response of a capacitive pressure sensor whose diaphragm is designed to undergo very small deflections (typically less than 25 % of the thickness. The non-uniform gap between the electrodes is mathematically expressed as a combination of the initial gap between the electrodes (in the undeformed state and a displacement function in (x, y. The proposed displacement function is then utilized in evaluating the capacitance as a function of the applied pressure. The results obtained from the analytical approach are benchmarked against those obtained from COMSOL Multiphysics®, a popular Finite Element Analysis tool in the MEMS industry. It is observed that the results obtained from COMSOL Multiphysics® and those from the analytical approach are in good agreement with a maximum deviation of about 3.38 %.

  15. Characterization of microphones for snoring and breathing events analysis in mHealth.

    Science.gov (United States)

    Castillo, Yolanda; Camara, Miguel A; Blanco-Almazan, Dolores; Jane, Raimon

    2017-07-01

    Obstructive sleep apnea (OSA) is one of the most common sleep disorders, especially in elderly population. Despite its high prevalence and severe consequences, most patients remain undiagnosed due to serious limitations on the existing equipment. Efforts are being done to find cost-effective alternatives and mHealth solutions could play a key role. One promising approach in this context is the acoustic analysis of snoring. The sensor it requires is a microphone, which is widely available in different models and even integrated in smartphones. The objective of this work is to characterize and compare the responses of two commercial tracheal microphones and a mHealth-based microphone, as a proof-of-concept to evaluate their potential as sensors for OSA detection. To do that, we designed an experimental protocol to study OSA-related events (breaths, snores and apneas) simulated by 4 subjects. Test signals were simultaneously recorded with different microphones and posteriorly processed and analyzed. We accurately characterized the frequency response of the two commercial microphones, finding that one of them was too restrictive (bandwidth 50-250 Hz) and thus not suitable as snoring sensor for high-frequency acoustic analysis. Regarding smartphones, we studied the Samsung Galaxy S5 microphone. We found that, when located over the thorax, it provided quality signals comparable to those of tracheal microphones, with a broader frequency response. Further work is required, but this preliminary study suggests that acoustic analysis of snoring through mHealth solutions can be a feasible alternative to screen and monitor OSA patients at home.

  16. A comparison of the Standing Wave and Two Microphone Methods in Measuring The Sound Absorption Coefficient of Wood

    OpenAIRE

    Kang, Chunwon; Matsumura, Junji; Oda, Kazuyuki

    2006-01-01

    To compare the standing wave method with two microphone transfer function method in the measuring the sound absorption properties of wood, we measured the sound absorption coefficients of beech wood experimentally in the frequency range of 50 to 1600 Hz by the standing wave method and two-microphone method. The sound absorption coefficient under a continuous frequency range can be estimated in a shorter time by the two microphone transfer function method than the standing wave method. There...

  17. Variable Emissivity Through MEMS Technology

    Science.gov (United States)

    Darrin, Ann Garrison; Osiander, Robert; Champion, John; Swanson, Ted; Douglas, Donya; Grob, Lisa M.; Powers, Edward I. (Technical Monitor)

    2000-01-01

    This paper discusses a new technology for variable emissivity (vari-e) radiator surfaces, which has significant advantages over traditional radiators and promises an alternative design technique for future spacecraft thermal control systems. All spacecraft rely on radiative surfaces to dissipate waste heat. These radiators have special coatings, typically with a low solar absorptivity and a high infrared-red emissivity, that are intended to optimize performance under the expected heat load and thermal sink environment. The dynamics of the heat loads and thermal environment make it a challenge to properly size the radiator and often require some means of regulating the heat rejection rate of the radiators in order to achieve proper thermal balance. Specialized thermal control coatings, which can passively or actively adjust their emissivity offer an attractive solution to these design challenges. Such systems would allow intelligent control of the rate of heat loss from a radiator in response to heat load and thermal environmental variations. Intelligent thermal control through variable emissivity systems is well suited for nano and pico spacecraft applications where large thermal fluctuations are expected due to the small thermal mass and limited electric resources. Presently there are three different types of vari-e technologies under development: Micro ElectroMechanical Systems (MEMS) louvers, Electrochromic devices, and Electrophoretic devices. This paper will describe several prototypes of micromachined (MEMS) louvers and experimental results for the emissivity variations measured on theses prototypes. It will further discuss possible actuation mechanisms and space reliability aspects for different designs. Finally, for comparison parametric evaluations of the thermal performances of the new vari-e technology and standard thermal control systems are presented in this paper.

  18. Blind source separation and localization using microphone arrays

    Science.gov (United States)

    Sun, Longji

    The blind source separation and localization problem for audio signals is studied using microphone arrays. Pure delay mixtures of source signals typically encountered in outdoor environments are considered. Our proposed approach utilizes the subspace methods, including multiple signal classification (MUSIC) and estimation of signal parameters via rotational invariance techniques (ESPRIT) algorithms, to estimate the directions of arrival (DOAs) of the sources from the collected mixtures. Since audio signals are generally considered broadband, the DOA estimates at frequencies with the large sum of squared amplitude values are combined to obtain the final DOA estimates. Using the estimated DOAs, the corresponding mixing and demixing matrices are computed, and the source signals are recovered using the inverse short time Fourier transform. Subspace methods take advantage of the spatial covariance matrix of the collected mixtures to achieve robustness to noise. While the subspace methods have been studied for localizing radio frequency signals, audio signals have their special properties. For instance, they are nonstationary, naturally broadband and analog. All of these make the separation and localization for the audio signals more challenging. Moreover, our algorithm is essentially equivalent to the beamforming technique, which suppresses the signals in unwanted directions and only recovers the signals in the estimated DOAs. Several crucial issues related to our algorithm and their solutions have been discussed, including source number estimation, spatial aliasing, artifact filtering, different ways of mixture generation, and source coordinate estimation using multiple arrays. Additionally, comprehensive simulations and experiments have been conducted to examine various aspects of the algorithm. Unlike the existing blind source separation and localization methods, which are generally time consuming, our algorithm needs signal mixtures of only a short duration and

  19. Digital holography for MEMS and microsystem metrology

    CERN Document Server

    Asundi, Anand

    2011-01-01

    Approaching the topic of digital holography from the practical perspective of industrial inspection, Digital Holography for MEMS and Microsystem Metrology describes the process of digital holography and its growing applications for MEMS characterization, residual stress measurement, design and evaluation, and device testing and inspection. Asundi also provides a thorough theoretical grounding that enables the reader to understand basic concepts and thus identify areas where this technique can be adopted. This combination of both practical and theoretical approach will ensure the

  20. Fabrication of integrated metallic MEMS devices

    DEFF Research Database (Denmark)

    Yalcinkaya, Arda Deniz; Ravnkilde, Jan Tue; Hansen, Ole

    2002-01-01

    A simple and complementary metal oxide semiconductor (CMOS) compatible fabrication technique for microelectromechanical (MEMS) devices is presented. The fabrication technology makes use of electroplated metal layers. Among the fabricated devices, high quality factor microresonators are characteri......A simple and complementary metal oxide semiconductor (CMOS) compatible fabrication technique for microelectromechanical (MEMS) devices is presented. The fabrication technology makes use of electroplated metal layers. Among the fabricated devices, high quality factor microresonators...

  1. Nano-tribology and materials in MEMS

    CERN Document Server

    Satyanarayana, N; Lim, Seh

    2013-01-01

    This book brings together recent developments in the areas of MEMS tribology, novel lubricants and coatings for nanotechnological applications, biomimetics in tribology and fundamentals of micro/nano-tribology. Tribology plays important roles in the functioning and durability of machines at small length scales because of the problems associated with strong surface adhesion, friction, wear etc. Recently, a number of studies have been conducted to understand tribological phenomena at nano/micro scales and many new tribological solutions for MEMS have been proposed.

  2. Challenges in the Packaging of MEMS

    Energy Technology Data Exchange (ETDEWEB)

    BROWN, WILLIAM D.; EATON, WILLIAM P.; MALSHE, AJAY P.; MILLER, WILLIAM M.; O' NEAL, CHAD; SINGH, SUSHILA B.

    1999-09-24

    Microelectromechanical Systems (MEMS) packaging is much different from conventional integrated circuit (IC) packaging. Many MEMS devices must interface to the environment in order to perform their intended function, and the package must be able to facilitate access with the environment while protecting the device. The package must also not interfere with or impede the operation of the MEMS device. The die attachment material should be low stress, and low outgassing, while also minimizing stress relaxation overtime which can lead to scale factor shifts in sensor devices. The fabrication processes used in creating the devices must be compatible with each other, and not result in damage to the devices. Many devices are application specific requiring custom packages that are not commercially available. Devices may also need media compatible packages that can protect the devices from harsh environments in which the MEMS device may operate. Techniques are being developed to handle, process, and package the devices such that high yields of functional packaged parts will result. Currently, many of the processing steps are potentially harmful to MEMS devices and negatively affect yield. It is the objective of this paper to review and discuss packaging challenges that exist for MEMS systems and to expose these issues to new audiences from the integrated circuit packaging community.

  3. Dynamic metasurface lens based on MEMS technology

    Directory of Open Access Journals (Sweden)

    Tapashree Roy

    2018-02-01

    Full Text Available In the recent years, metasurfaces, being flat and lightweight, have been designed to replace bulky optical components with various functions. We demonstrate a monolithic Micro-Electro-Mechanical System (MEMS integrated with a metasurface-based flat lens that focuses light in the mid-infrared spectrum. A two-dimensional scanning MEMS platform controls the angle of the lens along two orthogonal axes by ±9°, thus enabling dynamic beam steering. The device could be used to compensate for off-axis incident light and thus correct for aberrations such as coma. We show that for low angular displacements, the integrated lens-on-MEMS system does not affect the mechanical performance of the MEMS actuators and preserves the focused beam profile as well as the measured full width at half maximum. We envision a new class of flat optical devices with active control provided by the combination of metasurfaces and MEMS for a wide range of applications, such as miniaturized MEMS-based microscope systems, LIDAR scanners, and projection systems.

  4. A novel piezoresistive polymer nanocomposite MEMS accelerometer

    International Nuclear Information System (INIS)

    Seena, V; Hari, K; Prajakta, S; Ramgopal Rao, V; Pratap, Rudra

    2017-01-01

    A novel polymer MEMS (micro electro mechanical systems) accelerometer with photo-patternable polymer nanocomposite as a piezoresistor is presented in this work. Polymer MEMS Accelerometer with beam thicknesses of 3.3 µ m and embedded nanocomposite piezoresistive layer having a gauge factor of 90 were fabricated. The photosensitive nanocomposite samples were prepared and characterized for analyzing the mechanical and electrical properties and thereby ensuring proper process parameters for incorporating the piezoresistive layer into the polymer MEMS accelerometer. The microfabrication process flow and unit processes followed are extremely low cost with process temperatures below 100 °C. This also opens up a new possibility for easy integration of such polymer MEMS with CMOS (complementary metal oxide semiconductor) devices and circuits. The fabricated devices were characterized using laser Doppler vibrometer (LDV) and the devices exhibited a resonant frequency of 10.8 kHz and a response sensitivity of 280 nm g −1 at resonance. The main focus of this paper is on the SU-8/CB nanocomposite piezoresistive MEMS accelerometer technology development which covers the material and the fabrication aspects of these devices. CoventorWare FEA analysis performed using the extracted material properties from the experimental characterization which are in close agreement to performance parameters of the fabricated devices is also discussed. The simulated piezoresistive polymer MEMS devices showed an acceleration sensitivity of 126 nm g −1 and 82 ppm of Δ R / R per 1 g of acceleration. (paper)

  5. Dynamic metasurface lens based on MEMS technology

    Science.gov (United States)

    Roy, Tapashree; Zhang, Shuyan; Jung, Il Woong; Troccoli, Mariano; Capasso, Federico; Lopez, Daniel

    2018-02-01

    In the recent years, metasurfaces, being flat and lightweight, have been designed to replace bulky optical components with various functions. We demonstrate a monolithic Micro-Electro-Mechanical System (MEMS) integrated with a metasurface-based flat lens that focuses light in the mid-infrared spectrum. A two-dimensional scanning MEMS platform controls the angle of the lens along two orthogonal axes by ±9°, thus enabling dynamic beam steering. The device could be used to compensate for off-axis incident light and thus correct for aberrations such as coma. We show that for low angular displacements, the integrated lens-on-MEMS system does not affect the mechanical performance of the MEMS actuators and preserves the focused beam profile as well as the measured full width at half maximum. We envision a new class of flat optical devices with active control provided by the combination of metasurfaces and MEMS for a wide range of applications, such as miniaturized MEMS-based microscope systems, LIDAR scanners, and projection systems.

  6. Common mode noise reduction using parasitic capacitance cancellation

    OpenAIRE

    2007-01-01

    A negative capacitance is developed by configuring an inductor as two inversely or opposingly coupled windings having different numbers of turns and connecting a capacitance to a center tap between the two windings. The negative capacitance is developed on the side of the inductor having the winding with the greater number of turns. The negative capacitance so developed may advantageously be used to cancel any capacitance or parasitic capacitance desired for reducing power loss, increasing sw...

  7. Postgraduate students as OER capacitators

    Directory of Open Access Journals (Sweden)

    Thomas William King

    2017-06-01

    Full Text Available A comprehensive theoretical, legal and practical basis for OER has been developed over the past fifteen years, supported by the expansion of open source curation platforms and the work of advocacy groups and international bodies. OER’s potential has been sufficiently documented; the question remains how best to support, integrate and normalise OER activity within the academic community in a sustainable fashion. This paper draws on the experiences of the Vice Chancellor’s Open Educational Resources Adaptation project in the University of Cape Town, which explored whether postgraduate students, with their blend of developing subject knowledge, greater time resources, and experience of teaching artefacts from both a learner’s and educator’s perspective, may be a valuable resource for lecturers or institutions eager to engage in OER but lacking the requisite support structures. It was found that postgraduates were best employed as capacitating agents, focusing on the non-pedagogical elements of OER adaptation.

  8. Capacitively-coupled chopper amplifiers

    CERN Document Server

    Fan, Qinwen; Huijsing, Johan H

    2017-01-01

    This book describes the concept and design of the capacitively-coupled chopper technique, which can be used in precision analog amplifiers. Readers will learn to design power-efficient amplifiers employing this technique, which can be powered by regular low supply voltage such as 2V and possibly having a +\\-100V input common-mode voltage input. The authors provide both basic design concepts and detailed design examples, which cover the area of both operational and instrumentation amplifiers for multiple applications, particularly in power management and biomedical circuit designs. Discusses basic working principles and details of implementation for proven designs; Includes a diverse set of applications, along with measurement results to demonstrate the effectiveness of the technique; Explains advantages and drawbacks of the technique, given particular circumstances.

  9. Modal Analysis of a Single-Structure Multiaxis MEMS Gyroscope

    Directory of Open Access Journals (Sweden)

    Muhammad Ali Shah

    2016-01-01

    Full Text Available This paper reports on designing a single-structure triaxes MEMS capacitive gyroscope which is capable of measuring the three angular velocities on a single drive. A Z-shaped beam for the support of folded coupling spring has been applied to suppress the unwanted mode and decrease the stress effect at the spring ends. The unique coupling spring has changed the driving motion, due to which slide film damping in the driving mode has been reduced. This reduction can lead to higher performance of the sensor with less requirements on vacuum level which decreases the cost of fabrication. Simulation analysis has been performed in COMSOL Multiphysics and Matlab Simulink to finalize the design for fabrication. After finite element analysis, the driving, x-sensing, z-sensing, and y-sensing are, respectively, found to be 13.30 KHz, 13.40 KHz, 13.47 KHz, and 13.51 KHz.

  10. A Dual-Axis Electrostatically Driven MEMS Microgripper

    Directory of Open Access Journals (Sweden)

    Yukun Jia

    2014-11-01

    Full Text Available This paper presents the design of a new monolithic two-axis electrostatically actuated MEMS microgripper with integrated capacitive position and force sensors working at the micro-scale level. Each of the two jaws of the microgripper possesses two degrees-of-freedom (DOF and is capable of positioning in both x-and y-axes. Unlike existing works, where one gripper arm is actuated and other one is sensed, both arms of the proposed microgripper are actuated and sensed independently. A sensing scheme is constructed to provide the position and force signals in the noncontact and contact phases, respectively. By applying a 120V driving voltage, the jaw can provide 70 μm x-axis and 18 μm y-axis displacements with the force of 190 μN. By this design, the real-time position and grasping force information can be obtained in the dual sensing mode. Both analytical calculation and finite-element analysis (FEA were performed to verify the performance of the proposed design. A scaled-up prototype is designed, fabricated and tested through the experiment to verify the structure design of the microgripper.

  11. Characteristics of Relocated Quiet Zones Using Virtual Microphone Algorithm in an Active Headrest System

    Directory of Open Access Journals (Sweden)

    Seokhoon Ryu

    2016-01-01

    Full Text Available This study displays theoretical and experimental investigation on the characteristics of the relocated zone of quiet by a virtual microphone (VM based filtered-x LMS (FxLMS algorithm which can be embedded in a real-time digital controller for an active headrest system. The attenuation changes at the relocated zones of quiet by the variation of the distance between the ear and the error microphone are mainly examined. An active headrest system was implemented for the control experiment at a chair and consists of two (left and right secondary loudspeakers, two error microphones, two observer microphones at ear positions in a HATS, and other electronics including a dSPACE 1401 controller. The VM based FxLMS algorithm achieved an attenuation of about 22 dB in the control experiment against a narrowband primary noise by the variation of the distance between the ear and the error microphone. The important factors for the algorithm are discussed as well.

  12. A nonlinear active noise control algorithm for virtual microphones controlling chaotic noise.

    Science.gov (United States)

    Das, Debi Prasad; Moreau, Danielle J; Cazzolato, Ben S

    2012-08-01

    In active noise control (ANC) systems, virtual microphones provide a means of projecting the zone of quiet away from the physical microphone to a remote location. To date, linear ANC algorithms, such as the filtered-x least mean square (FXLMS) algorithm, have been used with virtual sensing techniques. In this paper, a nonlinear ANC algorithm is developed for a virtual microphone by integrating the remote microphone technique with the filtered-s least mean square (FSLMS) algorithm. The proposed algorithm is evaluated experimentally in the cancellation of chaotic noise in a one-dimensional duct. The secondary paths evaluated experimentally exhibit non-minimum phase response and hence poor performance is obtained with the conventional FXLMS algorithm compared to the proposed FSLMS based algorithm. This is because the latter is capable of predicting the chaotic signal found in many physical processes responsible for noise. In addition, the proposed algorithm is shown to outperform the FXLMS based remote microphone technique under the causality constraint (when the propagation delay of the secondary path is greater than the primary path). A number of experimental results are presented in this paper to compare the performance of the FSLMS algorithm based virtual ANC algorithm with the FXLMS based virtual ANC algorithm.

  13. MEMS-BASED OSCILLATORS: A REVIEW

    Directory of Open Access Journals (Sweden)

    Jamilah Karim

    2014-05-01

    Full Text Available ABSTRACT: This paper presents an overview of microelectromechanical (MEMS based oscillators. The accuracy and stability of the reference frequency will normally limit the performance of most wireless communication systems. MEMS technology is the technology of choice due to its compatibility to silicon, leading to integration with circuits and lowering power consumption. MEMS based oscillators also provide the potential of a fully integrated transceiver. The most commonly used topology for MEMS based oscillators are pierce oscillator circuit topology and TIA circuit topology. Both topologies result in very competitive output in terms of phase noise and power consumption.  They can be used for either higher or lower Rx. The major difference between both topologies is the number of transistors used. TIA circuit used more number of transistor compare to pierce circuit. Thus design complexity of the TIA is higher. Pierce circuit is simpler, provide straightforward biasing and easier to design. The highly integratable of MEMS-based oscillators have made them much needed in future multiband wireless system. So that future wireless systems are able to function globally without any problem. ABSTRAK: Kertas kerja ini membentangkan gambaran keseluruhan mikroelektromekanikal (MEMS berdasarkan pengayun.  Ketepatan dan kestabilan frekuensi rujukan sering membataskan perlaksanaan kebanyakan sistem komunikasi tanpa wayar. Teknologi MEMS merupakan teknologi pilihan memandangkan ia serasi dengan silikon; membolehkan integrasi dengan litar dan penggunaan tenaga yang rendah.  Pengayun berdasarkan MEMS juga  berpotensi sebagai integrasi penuh penghantar-terima. Topologi yang sering digunakan untuk pengayun berdasarkan MEMS adalah topologi litar pengayun pencantas dan topologi litar TIA.  Keputusan bagi kedua-dua topologi adalah amat kompetitif dari segi fasa bunyi dan penggunaan tenaga. Ia boleh digunakan untuk meninggikan atau merendahkan Rx. Perbezaan utama

  14. Reducing the capacitance of piezoelectric film sensors

    Energy Technology Data Exchange (ETDEWEB)

    González, Martín G., E-mail: mggonza@fi.uba.ar [Grupo de Láser, Óptica de Materiales y Aplicaciones Electromagnéticas (GLOMAE), Departamento de Física, Facultad de Ingeniería, Universidad de Buenos Aires, Paseo Colón 850, C1063ACV Buenos Aires (Argentina); Consejo Nacional de Investigaciones Científicas y Técnicas (CONICET), C1425FQB Buenos Aires (Argentina); Sorichetti, Patricio A.; Santiago, Guillermo D. [Grupo de Láser, Óptica de Materiales y Aplicaciones Electromagnéticas (GLOMAE), Departamento de Física, Facultad de Ingeniería, Universidad de Buenos Aires, Paseo Colón 850, C1063ACV Buenos Aires (Argentina)

    2016-04-15

    We present a novel design for large area, wideband, polymer piezoelectric sensor with low capacitance. The large area allows better spatial resolution in applications such as photoacoustic tomography and the reduced capacitance eases the design of fast transimpedance amplifiers. The metalized piezoelectric polymer thin film is segmented into N sections, electrically connected in series. In this way, the total capacitance is reduced by a factor 1/N{sup 2}, whereas the mechanical response and the active area of the sensor are not modified. We show the construction details for a two-section sensor, together with the impedance spectroscopy and impulse response experimental results that validate the design.

  15. Reducing the capacitance of piezoelectric film sensors

    International Nuclear Information System (INIS)

    González, Martín G.; Sorichetti, Patricio A.; Santiago, Guillermo D.

    2016-01-01

    We present a novel design for large area, wideband, polymer piezoelectric sensor with low capacitance. The large area allows better spatial resolution in applications such as photoacoustic tomography and the reduced capacitance eases the design of fast transimpedance amplifiers. The metalized piezoelectric polymer thin film is segmented into N sections, electrically connected in series. In this way, the total capacitance is reduced by a factor 1/N 2 , whereas the mechanical response and the active area of the sensor are not modified. We show the construction details for a two-section sensor, together with the impedance spectroscopy and impulse response experimental results that validate the design.

  16. A low-voltage silicon condenser microphone for hearing instrument applications

    DEFF Research Database (Denmark)

    Rombach, Pirmin; Müllenborn, Matthias; Klein, Udo

    1999-01-01

    .g., membrane and back plate, a dedicated process sequence has been developed. Therefore, circuitry and mechanical parts have to be produced separately and mounted later in a stacking process. The microphone has a 2×2 mm2, 0.4 µm-thick membrane and an air gap of 1.0 µm. Wafers with different membrane stress...... have been produced. The microphones have been acoustically, mechanically, and electrically characterized, partly on wafer-scale, and compared with an acoustical/electrical lumped element model. The sensitivity for the low-stress microphones using a 1.5 V power supply is about 7.0 mV/Pa and the input...

  17. Microphone directionality, pre-emphasis filter, and wind noise in cochlear implants.

    Science.gov (United States)

    Chung, King; McKibben, Nicholas

    2011-10-01

    Wind noise can be a nuisance or a debilitating masker for cochlear implant users in outdoor environments. Previous studies indicated that wind noise at the microphone/hearing aid output had high levels of low-frequency energy and the amount of noise generated is related to the microphone directionality. Currently, cochlear implants only offer either directional microphones or omnidirectional microphones for users at-large. As all cochlear implants utilize pre-emphasis filters to reduce low-frequency energy before the signal is encoded, effective wind noise reduction algorithms for hearing aids might not be applicable for cochlear implants. The purposes of this study were to investigate the effect of microphone directionality on speech recognition and perceived sound quality of cochlear implant users in wind noise and to derive effective wind noise reduction strategies for cochlear implants. A repeated-measure design was used to examine the effects of spectral and temporal masking created by wind noise recorded through directional and omnidirectional microphones and the effects of pre-emphasis filters on cochlear implant performance. A digital hearing aid was programmed to have linear amplification and relatively flat in-situ frequency responses for the directional and omnidirectional modes. The hearing aid output was then recorded from 0 to 360° at flow velocities of 4.5 and 13.5 m/sec in a quiet wind tunnel. Sixteen postlingually deafened adult cochlear implant listeners who reported to be able to communicate on the phone with friends and family without text messages participated in the study. Cochlear implant users listened to speech in wind noise recorded at locations that the directional and omnidirectional microphones yielded the lowest noise levels. Cochlear implant listeners repeated the sentences and rated the sound quality of the testing materials. Spectral and temporal characteristics of flow noise, as well as speech and/or noise characteristics before

  18. Investigation of noise radiation from a swirl stabilized diffusion flame with an array of microphones

    International Nuclear Information System (INIS)

    Singh, A.V.; Yu, M.; Gupta, A.K.; Bryden, K.M.

    2013-01-01

    Highlights: • Acoustic spectral characteristics independent of equivalence ratio and flow velocity. • Combustion noise dependent on global equivalence ratio and flow velocity. • Increased global equivalence ratio decreased the frequency of peak. • Decay and growth coefficients largely independent of different flow conditions. • Acoustic radiation coherent up to 1.5 kHz for spatially separated microphones. - Abstract: Next generation of combustors are expected to provide significant improvement on efficiency and reduced pollutants emission. In such combustors, the challenges of local flow, pressure, chemical composition and thermal signatures as well as their interactions will require detailed investigation for seeking optimum performance. Sensor networks with a large number of sensors will be employed in future smart combustors, which will allow one to obtain fast and comprehensive information on the various ongoing processes within the system. In this paper sensor networks with specific focus on an array of homogeneous microphones are used examine the spectral characteristics of combustion noise from a non-premixed combustor. A non-premixed double concentric swirl-flame burner was used. Noise spectra were determined experimentally for the non-premixed swirl flame at various fuel–air ratios using an array of homogeneous condenser microphones. Multiple microphones positioned at discrete locations around the turbulent diffusion flame, provided an understanding of the total sound power and their spectral characteristics. The growth and decay coefficients of total sound power were investigated at different test conditions. The signal coherence between different microphone pairs was also carried out to determine the acoustic behavior of a swirl stabilized turbulent diffusion flame. The localization of acoustic sources from the multiple microphones was examined using the noise spectra. The results revealed that integration of multiple sensors in combustors

  19. Distributed Max-SINR Speech Enhancement with Ad Hoc Microphone Arrays

    DEFF Research Database (Denmark)

    Tavakoli, Vincent Mohammad; Jensen, Jesper Rindom; Heusdens, Richard

    2017-01-01

    In recent years, signal processing with ad hoc microphone arrays has attracted a lot of attention. Speech enhancement in noisy, interfered, and reverberant environments is one of the problems targeted by ad hoc microphone arrays. Most of the proposed solutions require knowledge of fingerprints......-SINR) criterion is used with the primal-dual method of multipliers for distributed filtering. The paper investigates the convergence of the algorithm in both synchronous and asynchronous schemes, and also discusses some practical pros and cons. The applicability of the proposed method is demonstrated by means...

  20. DFT-Domain Based Single-Microphone Noise Reduction for Speech Enhancement

    DEFF Research Database (Denmark)

    C. Hendriks, Richard; Gerkmann, Timo; Jensen, Jesper

    As speech processing devices like mobile phones, voice controlled devices, and hearing aids have increased in popularity, people expect them to work anywhere and at any time without user intervention. However, the presence of acoustical disturbances limits the use of these applications, degrades...... their performance, or causes the user difficulties in understanding the conversation or appreciating the device. A common way to reduce the effects of such disturbances is through the use of single-microphone noise reduction algorithms for speech enhancement. The field of single-microphone noise reduction...

  1. Mid infrared MEMS FTIR spectrometer

    Science.gov (United States)

    Erfan, Mazen; Sabry, Yasser M.; Mortada, Bassem; Sharaf, Khaled; Khalil, Diaa

    2016-03-01

    In this work we report, for the first time to the best of our knowledge, a bulk-micromachined wideband MEMS-based spectrometer covering both the NIR and the MIR ranges and working from 1200 nm to 4800 nm. The core engine of the spectrometer is a scanning Michelson interferometer micro-fabricated using deep reactive ion etching (DRIE) technology. The spectrum is obtained using the Fourier Transform techniques that allows covering a very wide spectral range limited by the detector responsivity. The moving mirror of the interferometer is driven by a relatively large stroke electrostatic comb-drive actuator. Zirconium fluoride (ZrF4) multimode optical fibers are used to connect light between the white light source and the interferometer input, as well as the interferometer output to a PbSe photoconductive detector. The recorded signal-to-noise ratio is 25 dB at the wavelength of 3350 nm. The spectrometer is successfully used in measuring the absorption spectra of methylene chloride, quartz glass and polystyrene film. The presented solution provides a low cost method for producing miniaturized spectrometers in the near-/mid-infrared.

  2. Highly elastic conductive polymeric MEMS

    Science.gov (United States)

    Ruhhammer, J.; Zens, M.; Goldschmidtboeing, F.; Seifert, A.; Woias, P.

    2015-02-01

    Polymeric structures with integrated, functional microelectrical mechanical systems (MEMS) elements are increasingly important in various applications such as biomedical systems or wearable smart devices. These applications require highly flexible and elastic polymers with good conductivity, which can be embedded into a matrix that undergoes large deformations. Conductive polydimethylsiloxane (PDMS) is a suitable candidate but is still challenging to fabricate. Conductivity is achieved by filling a nonconductive PDMS matrix with conductive particles. In this work, we present an approach that uses new mixing techniques to fabricate conductive PDMS with different fillers such as carbon black, silver particles, and multiwalled carbon nanotubes. Additionally, the electrical properties of all three composites are examined under continuous mechanical stress. Furthermore, we present a novel, low-cost, simple three-step molding process that transfers a micro patterned silicon master into a polystyrene (PS) polytetrafluoroethylene (PTFE) replica with improved release features. This PS/PTFE mold is used for subsequent structuring of conductive PDMS with high accuracy. The non sticking characteristics enable the fabrication of delicate structures using a very soft PDMS, which is usually hard to release from conventional molds. Moreover, the process can also be applied to polyurethanes and various other material combinations.

  3. Automotive Sensors and MEMS Technology

    Science.gov (United States)

    Nonomura, Yutaka

    - Automotive sensors are used for emission gas purification, energy conservation, car kinematic performance, safety and ITS (intelligent transportation system). The comparison of the sensor characteristics was made for their application area. Many kinds of the principles are applied for the sensors. There are two types of sensors, such as physical and chemical one. Many of the automotive sensors are physical type such as mechanical sensors. And a gas sensor is a chemical type. The sensors have been remarkably developed with the advancement of the MEMS (Micro Electro Mechanical Systems) technology. In this paper, gas, pressure, combustion pressure, acceleration, magnetic, and angular rate sensors for automotive use are explained with their features. The sensors are key devices to control cars in the engine, power train, chassis and safety systems. The environment resistance, long term reliability, and low cost are required for the automotive sensors. They are very hard to be resolved. However, the sensor technology contributes greatly to improving global environment, energy conservation, and safety. The applications of automotive sensors will be expanded with the automobile developments.

  4. A Nuclear Microbattery for MEMS Devices

    International Nuclear Information System (INIS)

    Blanchard, James; Henderson, Douglass; Lal, Amit

    2002-01-01

    This project was designed to demonstrate the feasibility of producing on-board power for MEMS devices using radioisotopes. MEMS is a fast growing field, with hopes for producing a wide variety of revolutionary applications, including ''labs on a chip,'' micromachined scanning tunneling microscopes, microscopic detectors for biological agents, microsystems for DNA identification, etc. Currently, these applications are limited by the lack of an on-board power source. Research is ongoing to study approaches such as fuel cells, fossil fuels, and chemical batteries, but all these concepts have limitations. For long-lived, high energy density applications, on-board radioisotope power offers the best choice. We have succeeded in producing such devices using a variety of isotopes, incorporation methods, and device geometries. These experiments have demonstrated the feasibility of using radioisotope power and that there are a variety of options available for MEMS designers. As an example of an integrated, self-powered application, we have created an oscillating cantilever beam that is capable of consistent, periodic oscillations over very long time periods without the need for refueling. Ongoing work will demonstrate that this cantilever is capable of radio frequency transmission, allowing MEMS devices to communicate with one another wirelessly. Thus, this will be the first self-powered wireless transmitter available for use in MEMS devices, permitting such applications as sensors embedded in buildings for continuous monitoring of the building performance and integrity

  5. A miniature electrical capacitance tomograph

    Science.gov (United States)

    York, T. A.; Phua, T. N.; Reichelt, L.; Pawlowski, A.; Kneer, R.

    2006-08-01

    The paper describes a miniature electrical capacitance tomography system. This is based on a custom CMOS silicon integrated circuit comprising eight channels of signal conditioning electronics to source drive signals and measure voltages. Electrodes are deposited around a hole that is fabricated, using ultrasonic drilling, through a ceramic substrate and has an average diameter of 0.75 mm. The custom chip is interfaced to a host computer via a bespoke data acquisition system based on a microcontroller, field programmable logic device and wide shift register. This provides fast capture of up to 750 frames of data prior to uploading to the host computer. Data capture rates of about 6000 frames per second have been achieved for the eight-electrode sensor. This rate could be increased but at the expense of signal to noise. Captured data are uploaded to a PC, via a RS232 interface, for off-line imaging. Initial tests are reported for the static case involving 200 µm diameter rods that are placed in the sensor and for the dynamic case using the dose from an inhaler.

  6. Capacitive axial position and speed transduction system

    International Nuclear Information System (INIS)

    Jimenez D, H.; Flores Ll, H.; Cabral P, A.; Ramirez J, F.J.; Galindo, S.

    1984-01-01

    A new and inexpensive circuit arrangement of a capacitive axial position and speed transduction system is described. Design details and the theory of operation of the device are briefly outlined together with performance results. (author)

  7. Capacitive measurement of ECG for ubiquitous healthcare.

    Science.gov (United States)

    Lim, Yong Gyu; Lee, Jeong Su; Lee, Seung Min; Lee, Hong Ji; Park, Kwang Suk

    2014-11-01

    The technology for measuring ECG using capacitive electrodes and its applications are reviewed. Capacitive electrodes are built with a high-input-impedance preamplifier and a shield on their rear side. Guarding and driving ground are used to reduce noise. An analysis of the intrinsic noise shows that the thermal noise caused by the resistance in the preamplifier is the dominant factor of the intrinsic noise. A fully non-contact capacitive measurement has been developed using capacitive grounding and applied to a non-intrusive ECG measurement in daily life. Many ongoing studies are examining how to enhance the quality and ease of applying electrodes, thus extending their applications in ubiquitous healthcare from attached-on-object measurements to wearable or EEG measurements.

  8. Capacitive biosensor for detection of endotoxin.

    Science.gov (United States)

    Limbut, Warakorn; Hedström, Martin; Thavarungkul, Panote; Kanatharana, Proespichaya; Mattiasson, Bo

    2007-09-01

    A capacitive biosensor for the detection of bacterial endotoxin has been developed. Endotoxin-neutralizing protein derived from American horseshoe crab was immobilized to a self-assembled thiol layer on a biosensor transducer (Au). Upon injection of a sample containing endotoxin, a decrease in the observed capacitive signal was registered. Endotoxin could be determined under optimum conditions with a detection limit of 1.0 x 10(-13) M and linearity ranging from 1.0 x 10(-13) to 1.0 x 10(-10) M. Good agreement was achieved when applying endotoxin preparations purified from an Escherichia coli cultivation to the capacitive biosensor system, utilizing the conventional method for quantitative endotoxin determination, the Limulus amebocyte lysate test as a reference. The capacitive biosensor method was statistically tested with the Wilcoxon signed rank test, which proved the system is acceptable for the quantitative analysis of bacterial endotoxin (P<0.05).

  9. Resistive and Capacitive Based Sensing Technologies

    Directory of Open Access Journals (Sweden)

    Winncy Y. Du

    2008-04-01

    Full Text Available Resistive and capacitive (RC sensors are the most commonly used sensors. Their applications span homeland security, industry, environment, space, traffic control, home automation, aviation, and medicine. More than 30% of modern sensors are direct or indirect applications of the RC sensing principles. This paper reviews resistive and capacitive sensing technologies. The physical principles of resistive sensors are governed by several important laws and phenomena such as Ohm’s Law, Wiedemann-Franz Law; Photoconductive-, Piezoresistive-, and Thermoresistive Effects. The applications of these principles are presented through a variety of examples including accelerometers, flame detectors, pressure/flow rate sensors, RTDs, hygristors, chemiresistors, and bio-impedance sensors. The capacitive sensors are described through their three configurations: parallel (flat, cylindrical (coaxial, and spherical (concentric. Each configuration is discussed with respect to its geometric structure, function, and application in various sensor designs. Capacitance sensor arrays are also presented in the paper.

  10. Complementary surface charge for enhanced capacitive deionization

    NARCIS (Netherlands)

    Gao, X.; Porada, S.; Omosebi, A.; Liu, K.L.; Biesheuvel, P.M.; Landon, J.

    2016-01-01

    Commercially available activated carbon cloth electrodes are treated using nitric acid and ethylenediamine solutions, resulting in chemical surface charge enhanced carbon electrodes for capacitive deionization (CDI) applications. Surface charge enhanced electrodes are then configured in a CDI

  11. Capacitive Cells for Dielectric Constant Measurement

    Science.gov (United States)

    Aguilar, Horacio Munguía; Maldonado, Rigoberto Franco

    2015-01-01

    A simple capacitive cell for dielectric constant measurement in liquids is presented. As an illustrative application, the cell is used for measuring the degradation of overheated edible oil through the evaluation of their dielectric constant.

  12. Modeling technique of capacitive discharge pumping of metal vapor lasers for electrode capacitance optimization.

    Science.gov (United States)

    Gubarev, F A; Evtushenko, G S; Vuchkov, N K; Sukhanov, V B; Shiyanov, D V

    2012-05-01

    To estimate optimum gas discharge tube (GDT) electrode capacitance of metal vapor lasers (MVLs) pumped by a longitudinal capacitive discharge, we offer to use series connection of capacitors to the electrodes of a conventionally pumped GDT with inner electrodes. It has been demonstrated that the maximum output power in CuBr lasers is obtained when the capacitances of high-voltage and ground electrodes are equal. When using a model circuit an average output power reaches 12 W that suggests the possibility of generating high average output power (>10 W) in MVLs pumped using a capacitive discharge.

  13. Multi-Channel Capacitive Sensor Arrays

    OpenAIRE

    Wang, Bingnan; Long, Jiang; Teo, Koon Hoo

    2016-01-01

    In this paper, multi-channel capacitive sensor arrays based on microstrip band-stop filters are studied. The sensor arrays can be used to detect the proximity of objects at different positions and directions. Each capacitive sensing structure in the array is connected to an inductive element to form resonance at different frequencies. The resonances are designed to be isolated in the frequency spectrum, such that the change in one channel does not affect resonances at other channels. The indu...

  14. IC-Compatible Technologies for Optical MEMS

    Energy Technology Data Exchange (ETDEWEB)

    Krygowski, T.W.; Sniegowski, J.J.

    1999-04-30

    Optical Micro Electro Mechanical Systems (Optical MEMS) Technology holds the promise of one-day producing highly integrated optical systems on a common, monolithic substrate. The choice of fabrication technology used to manufacture Optical MEMS will play a pivotal role in the size, functionality and ultimately the cost of optical Microsystems. By leveraging the technology base developed for silicon integrated circuits, large batches of routers, emitters, detectors and amplifiers will soon be fabricated for literally pennies per part. In this article we review the current status of technologies used for Optical MEMS, as well as fabrication technologies of the future, emphasizing manufacturable surface micromachining approaches to producing reliable, low-cost devices for optical communications applications.

  15. MEMS tunable grating micro-spectrometer

    Science.gov (United States)

    Tormen, Maurizio; Lockhart, R.; Niedermann, P.; Overstolz, T.; Hoogerwerf, A.; Mayor, J.-M.; Pierer, J.; Bosshard, C.; Ischer, R.; Voirin, G.; Stanley, R. P.

    2017-11-01

    The interest in MEMS based Micro-Spectrometers is increasing due to their potential in terms of flexibility as well as cost, low mass, small volume and power savings. This interest, especially in the Near-Infrared and Mid- Infrared, ranges from planetary exploration missions to astronomy, e.g. the search for extra solar planets, as well as to many other terrestrial fields of application such as, industrial quality and surface control, chemical analysis of soil and water, detection of chemical pollutants, exhausted gas analysis, food quality control, process control in pharmaceuticals, to name a few. A compact MEMS-based Spectrometer for Near- Infrared and Mid-InfraRed operation have been conceived, designed and demonstrated. The design based on tunable MEMS blazed grating, developed in the past at CSEM [1], achieves state of the art results in terms of spectral resolution, operational wavelength range, light throughput, overall dimensions, and power consumption.

  16. Vortex Anemometer Using MEMS Cantilever Sensor

    CERN Document Server

    Zylka, P; Zylka, Pawel; Modrzynski, Pawel

    2010-01-01

    This paper presents construction and performance of a novel hybrid microelectromechanical system (MEMS) vortex flowmeter. A miniature cantilever MEMS displacement sensor was used to detect frequency of vortices development. 3-mm-long silicon cantilever, protruding directly out of a trailing edge of a trapezoidal glass-epoxy composite bluff body was put into oscillatory motion by vortices shed alternately from side surfaces of the obstacle. Verified linearmeasurement range of the device extended from 5 to 22 m/s; however, it could be broadened in absence of external 50-Hz mains electrical interfering signal which required bandpass frequency-domain digital sensor signal processing. The MEMS vortex sensor proved its effectiveness in detection of semilaminar airflow velocity distribution in a 40-mm-diameter tubular pipe.

  17. Narrow gap electronegative capacitive discharges

    Energy Technology Data Exchange (ETDEWEB)

    Kawamura, E.; Lieberman, M. A.; Lichtenberg, A. J. [Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720 (United States)

    2013-10-15

    Narrow gap electronegative (EN) capacitive discharges are widely used in industry and have unique features not found in conventional discharges. In this paper, plasma parameters are determined over a range of decreasing gap length L from values for which an electropositive (EP) edge exists (2-region case) to smaller L-values for which the EN region connects directly to the sheath (1-region case). Parametric studies are performed at applied voltage V{sub rf}=500 V for pressures of 10, 25, 50, and 100 mTorr, and additionally at 50 mTorr for 1000 and 2000 V. Numerical results are given for a parallel plate oxygen discharge using a planar 1D3v (1 spatial dimension, 3 velocity components) particle-in-cell (PIC) code. New interesting phenomena are found for the case in which an EP edge does not exist. This 1-region case has not previously been investigated in detail, either numerically or analytically. In particular, attachment in the sheaths is important, and the central electron density n{sub e0} is depressed below the density n{sub esh} at the sheath edge. The sheath oscillations also extend into the EN core, creating an edge region lying within the sheath and not characterized by the standard diffusion in an EN plasma. An analytical model is developed using minimal inputs from the PIC results, and compared to the PIC results for a base case at V{sub rf}=500 V and 50 mTorr, showing good agreement. Selected comparisons are made at the other voltages and pressures. A self-consistent model is also developed and compared to the PIC results, giving reasonable agreement.

  18. MEMS reliability: The challenge and the promise

    Energy Technology Data Exchange (ETDEWEB)

    Miller, W.M.; Tanner, D.M.; Miller, S.L.; Peterson, K.A.

    1998-05-01

    MicroElectroMechanical Systems (MEMS) that think, sense, act and communicate will open up a broad new array of cost effective solutions only if they prove to be sufficiently reliable. A valid reliability assessment of MEMS has three prerequisites: (1) statistical significance; (2) a technique for accelerating fundamental failure mechanisms, and (3) valid physical models to allow prediction of failures during actual use. These already exist for the microelectronics portion of such integrated systems. The challenge lies in the less well understood micromachine portions and its synergistic effects with microelectronics. This paper presents a methodology addressing these prerequisites and a description of the underlying physics of reliability for micromachines.

  19. Enabling technology for MEMS and nanodevices

    CERN Document Server

    Baltes, Henry; Fedder, Gary K; Hierold, Christofer; Korvink, Jan G; Tabata, Osamu

    2013-01-01

    This softcover edition of the eponymous volume from the successful ""Advanced Micro & Nanosystems"" series covers all aspects of fabrication of MEMS under CMOS-compatible conditions from design to implementation.It examines the various routes and methods to combine electronics generated by the CMOS technology with novel micromechanical parts into one-chip solutions. Various approaches, fundamental and technological aspects as well as strategies leading to different types of functionalities and presented in detail.For the practicing engineer as well as MSc and PhD students on MEMS cours

  20. Hermeticity testing of MEMS and microelectronic packages

    CERN Document Server

    Costello, Suzanne

    2013-01-01

    Packaging of microelectronics has been developing since the invention of the transistor in 1947. With the increasing complexity and decreasing size of the die, packaging requirements have continued to change. A step change in package requirements came with the introduction of the Micro-Electro-Mechanical System (MEMS) whereby interactions with the external environment are, in some cases, required.This resource is a rapid, definitive reference on hermetic packaging for the MEMS and microelectronics industry, giving practical guidance on traditional and newly developed test methods. This book in

  1. Liquid Tunable Microlenses based on MEMS techniques

    Science.gov (United States)

    Zeng, Xuefeng; Jiang, Hongrui

    2013-01-01

    The recent rapid development in microlens technology has provided many opportunities for miniaturized optical systems, and has found a wide range of applications. Of these microlenses, tunable-focus microlenses are of special interest as their focal lengths can be tuned using micro-scale actuators integrated with the lens structure. Realization of such tunable microlens generally relies on the microelectromechanical system (MEMS) technologies. Here, we review the recent progress in tunable liquid microlenses. The underlying physics relevant to these microlenses are first discussed, followed by description of three main categories of tunable microlenses involving MEMS techniques, mechanically driven, electrically driven, and those integrated within microfluidic systems. PMID:24163480

  2. RF MEMS theory, design, and technology

    CERN Document Server

    Rebeiz, Gabriel M

    2003-01-01

    Ultrasmall Radio Frequency and Micro-wave Microelectromechanical systems (RF MEMs), such as switches, varactors, and phase shifters, exhibit nearly zero power consumption or loss. For this reason, they are being developed intensively by corporations worldwide for use in telecommunications equipment. This book acquaints readers with the basics of RF MEMs and describes how to design practical circuits and devices with them. The author, an acknowledged expert in the field, presents a range of real-world applications and shares many valuable tricks of the trade.

  3. Review of Automated Design and Optimization of MEMS

    DEFF Research Database (Denmark)

    Achiche, Sofiane; Fan, Zhun; Bolognini, Francesca

    2007-01-01

    carried out. This paper presents a review of these techniques. The design task of MEMS is usually divided into four main stages: System Level, Device Level, Physical Level and the Process Level. The state of the art o automated MEMS design in each of these levels is investigated.......In recent years MEMS saw a very rapid development. Although many advances have been reached, due to the multiphysics nature of MEMS, their design is still a difficult task carried on mainly by hand calculation. In order to help to overtake such difficulties, attempts to automate MEMS design were...

  4. Design Optimization of Cantilever Based MEMS Micro-accelerometer for High-g Applications

    Directory of Open Access Journals (Sweden)

    B. D. PANT

    2009-11-01

    Full Text Available Design optimization study of micro-cantilever based MEMS accelerometer is presented in this paper. The cantilever structure is dc biased with an ac signal to extract output voltage generated due to the change in capacitance. This signal modifies the behavior of the sensing element. The cantilever performance under a combined inertial and electrostatic force has been considered for estimating the dimensional dependence of cantilever sensitivity, non-linearity, off-set and critical acceleration and operating voltages. The cantilever performance has been verified using ANSYSTM Multiphysics software. Finally, a micro-accelerometer based on an array of 15 cantilevers has been designed and fabricated with a high sensitivity of 3 - 4 mV/g with a non-linearity of < 1 % for high-g (50 g applications.

  5. A MEMS differential viscometric sensor for affinity glucose detection in continuous glucose monitoring

    International Nuclear Information System (INIS)

    Huang, Xian; Cai, Haogang; Song, Bing; Lin, Qiao; Li, Siqi; Davis, Erin; Wang, Qian; Leduc, Charles; Ravussin, Yann; Leibel, Rudolph; Li, Dachao; Accili, Domenico

    2013-01-01

    Micromachined viscometric affinity glucose sensors have been previously demonstrated using vibrational cantilever and diaphragm. These devices featured a single glucose detection module that determines glucose concentrations through viscosity changes of glucose-sensitive polymer solutions. However, fluctuations in temperature and other environmental parameters might potentially affect the stability and reliability of these devices, creating complexity in their applications in subcutaneously implanted continuous glucose monitoring (CGM). To address these issues, we present a MEMS differential sensor that can effectively reject environmental disturbances while allowing accurate glucose detection. The sensor consists of two magnetically driven vibrating diaphragms situated inside microchambers filled with a boronic-acid based glucose-sensing solution and a reference solution insensitive to glucose. Glucose concentrations can be accurately determined by characteristics of the diaphragm vibration through differential capacitive detection. Our in vitro and preliminary in vivo experimental data demonstrate the potential of this sensor for highly stable subcutaneous CGM applications. (paper)

  6. Análise eletromecânica do giroscópio MEMS

    OpenAIRE

    Anderson Henrique Rodrigues Ferreira

    2013-01-01

    Resumo: Este trabalho apresenta uma análise dos problemas físicos associados ao projeto de um sensor inercial giroscópio baseado na tecnologia MEMS (micro-electro-mechanical-system). O dispositivo oferece uma resposta elétrica na forma de uma variação da capacitância devido à força de Coriolis e como consequência obtém-se uma medida da velocidade angular de um sistema. Uma formulação analítica da dinâmica eletromecânica de um giroscópio com dois graus de liberdade é revista e implementada em ...

  7. A single-ended CMOS sensing circuit for MEMS gyroscope with noise cancellation

    KAUST Repository

    Elsayed, Mohannad Yomn

    2010-06-01

    In this work, a complete single-ended readout circuit for capacitive MEMS gyroscope using chopper stabilization technique is presented. A novel noise cancellation technique is used to get rid of the bias noise. The circuit offers superior performance over state of the art readout circuits in terms of cost, gain, and noise for the given area and power consumption. The full circuit exhibits a gain of 58dB, a power dissipation of 1.3mW and an input referred noise of 12nV/√Hz. This would significantly improve the overall sensitivity of the gyroscope. The full circuit has been fabricated in 0.6um CMOS technology and it occupies an area of 0.4mm × 1mm. © 2010 IEEE.

  8. Nonnegative signal factorization with learnt instrument models for sound source separation in close-microphone recordings

    Science.gov (United States)

    Carabias-Orti, Julio J.; Cobos, Máximo; Vera-Candeas, Pedro; Rodríguez-Serrano, Francisco J.

    2013-12-01

    Close-microphone techniques are extensively employed in many live music recordings, allowing for interference rejection and reducing the amount of reverberation in the resulting instrument tracks. However, despite the use of directional microphones, the recorded tracks are not completely free from source interference, a problem which is commonly known as microphone leakage. While source separation methods are potentially a solution to this problem, few approaches take into account the huge amount of prior information available in this scenario. In fact, besides the special properties of close-microphone tracks, the knowledge on the number and type of instruments making up the mixture can also be successfully exploited for improved separation performance. In this paper, a nonnegative matrix factorization (NMF) method making use of all the above information is proposed. To this end, a set of instrument models are learnt from a training database and incorporated into a multichannel extension of the NMF algorithm. Several options to initialize the algorithm are suggested, exploring their performance in multiple music tracks and comparing the results to other state-of-the-art approaches.

  9. Reconstruction of arbitrary sound fields with a rigid-sphere microphone array

    DEFF Research Database (Denmark)

    Fernandez Grande, Efren

    2013-01-01

    Over the last few years, several studies have examined the potential of using rigid-sphere microphone arrays for reconstructing sound fields with near-field acoustic holography (NAH). The existing methods provide a reconstruction of the sound field based on a spherical harmonic expansion. However...

  10. Efficient voice activity detection in reverberant enclosures using far field microphones

    DEFF Research Database (Denmark)

    Petsatodis, Theodore; Boukis, Christos

    2009-01-01

    An algorithm suitable for voice activity detection under reverberant conditions is proposed in this paper. Due to the use of far-filed microphones the proposed solution processes speech signals of highly-varying intensity and signal to noise ratio, that are contaminated with several echoes...

  11. Field trials using a digital hearing aid with active noise reduction and dual-microphone directionality

    NARCIS (Netherlands)

    Boymans, M.; Dreschler, W. A.

    2000-01-01

    In this study, we measured the effects of a digital hearing aid on speech recognition or reception in noise for two noise reduction concepts: active noise reduction by speech-sensitive processing (SSP) and improved directionality by a dual- or so-called twin-microphone system (TMS). This was

  12. Prediction of Quadcopter State through Multi-Microphone Side-Channel Fusion

    NARCIS (Netherlands)

    Koops, Hendrik Vincent; Garg, Kashish; Kim, Munsung; Li, Jonathan; Volk, Anja; Franchetti, Franz

    Improving trust in the state of Cyber-Physical Systems becomes increasingly important as more tasks become autonomous. We present a multi-microphone machine learning fusion approach to accurately predict complex states of a quadcopter drone in flight from the sound it makes using audio content

  13. Motorcycle detection and counting using stereo camera, IR camera, and microphone array

    Science.gov (United States)

    Ling, Bo; Gibson, David R. P.; Middleton, Dan

    2013-03-01

    Detection, classification, and characterization are the key to enhancing motorcycle safety, motorcycle operations and motorcycle travel estimation. Average motorcycle fatalities per Vehicle Mile Traveled (VMT) are currently estimated at 30 times those of auto fatalities. Although it has been an active research area for many years, motorcycle detection still remains a challenging task. Working with FHWA, we have developed a hybrid motorcycle detection and counting system using a suite of sensors including stereo camera, thermal IR camera and unidirectional microphone array. The IR thermal camera can capture the unique thermal signatures associated with the motorcycle's exhaust pipes that often show bright elongated blobs in IR images. The stereo camera in the system is used to detect the motorcyclist who can be easily windowed out in the stereo disparity map. If the motorcyclist is detected through his or her 3D body recognition, motorcycle is detected. Microphones are used to detect motorcycles that often produce low frequency acoustic signals. All three microphones in the microphone array are placed in strategic locations on the sensor platform to minimize the interferences of background noises from sources such as rain and wind. Field test results show that this hybrid motorcycle detection and counting system has an excellent performance.

  14. Temperature compensated, humidity insensitive, high-Tg TOPAS FBGs for accelerometers and microphones

    DEFF Research Database (Denmark)

    Stefani, Alessio; Yuan, W.; Markos, C.

    2012-01-01

    In this paper we present our latest work on Fiber Bragg Gratings (FBGs) in microstructured polymer optical fibers (mPOFs) and their application as strain sensing transducers in devices, such as accelerometers and microphones. We demonstrate how the cross-sensitivity of the FBG to temperature is e...... applications requiring high sensitivity due to the low Young's Modulus of polymer....

  15. Diagnostic accuracy of nasal cannula versus microphone for detection of snoring.

    Science.gov (United States)

    Pérez-Warnisher, María Teresa; Gómez-García, Teresa; Giraldo-Cadavid, Luis Fernando; Troncoso Acevedo, Maria Fernanda; Rodríguez Rodríguez, Paula; Carballosa de Miguel, Pilar; González Mangado, Nicolás

    2017-12-01

    Snoring is a common reason for referral to a sleep unit. Although there are several instruments to measure snoring, there is no gold standard for this purpose. In this study, we determine the diagnostic accuracy of the cannula as compared with the microphone, which are the two most commonly used tools. We performed a cross-sectional study of 75 patients who underwent baseline home sleep apnea testing for any reason. Snore intensity and percentage were assessed during Home sleep-apnea testing via nasal cannula and microphone in all patients. We performed a complete diagnostic accuracy analysis, assuming the microphone to be the reference instrument use in order to compare it with the cannula. The intra-class correlation coefficient between the cannula and microphone for the percentage of snoring was 0.25. The Bland Bland-Altman analysis to determine the agreement regarding the percentage of snoring showed a lower limit of -57.73 and an upper limit of 20.30. A linear regression analysis of the differences produced a negative slope of -0.86. The receiver operating characteristic curve for severe snoring using the cannula produced an area under the curve of 0.67 (P = 0.019). The cannula showed a sensitivity of 57.89 and a specificity of 73.21. The nasal cannula showed poor reliability and accuracy for measuring snoring. 2b. Laryngoscope, 127:2886-2890, 2017. © 2017 The American Laryngological, Rhinological and Otological Society, Inc.

  16. Environmental coefficients of the free-field sensitivity of measurement microphones

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Cutanda Henriquez, Vicente; Torras-Rosell, Antoni

    2017-01-01

    The sensitivity of measurement microphones, both pressure and free field, is affected by changes in the environmental conditions, mainly temperature and static pressure. Static pressure and temperature coefficients for the pressure sensitivity have been the object of previous studies focused on L...

  17. Benefits of the Fiber Optic versus the Electret Microphone in Voice Amplification

    Science.gov (United States)

    Kyriakou, Kyriaki; Fisher, Helene R.

    2013-01-01

    Background: Voice disorders that result in reduced loudness may cause difficulty in communicating, socializing and participating in occupational activities. Amplification is often recommended in order to facilitate functional communication, reduce vocal load and avoid developing maladaptive compensatory behaviours. The most common microphone used…

  18. MP.EXE, a Calculation Program for Pressure Reciprocity Calibration of Microphones

    DEFF Research Database (Denmark)

    Rasmussen, Knud

    1998-01-01

    A computer program is described which calculates the pressure sensitivity of microphones based on measurements of the electrical transfer impedance in a reciprocity calibration set-up. The calculations are performed according to the International Standard IEC 6194-2. In addition a number of optio...

  19. High frequency microphone measurements for transition detection on airfoils. NACA-0015 appendix report

    DEFF Research Database (Denmark)

    Døssing, Mads

    Time series of pressure fluctuations has been obtained using high frequency microphones distributed over the surface of airfoils undergoing wind tunnel tests in the LM Windtunnel, owned by ’LM Glasfiber’, Denmark. The present report describes the dataanalysis, with special attention given to tran...

  20. Near field acoustic holography with microphones mounted on a rigid sphere

    DEFF Research Database (Denmark)

    Jacobsen, Finn; Moreno, Guillermo; Fernandez Grande, Efren

    2008-01-01

    Spherical near field acoustic holography (spherical NAH) is a technique that makes it pos-sible to reconstruct the sound field inside and just outside an acoustically transparent spherical surface on which the sound pressure is measured with an array of microphones with negligible scattering...

  1. Spherical near field acoustic holography with microphones on a rigid sphere

    DEFF Research Database (Denmark)

    Jacobsen, Finn; Hald, Jørgen; Fernandez Grande, Efren

    2008-01-01

    Spherical near field acoustic holography (SNAH) is a recently developed technique that makes it possible to reconstruct the sound field inside and just outside an acoustically transparent spherical surface on which the sound pressure is measured with an array of microphones with negligible...

  2. An ultra-low noise capacitance to voltage converter for sensor applications in 0.35  µm CMOS

    Directory of Open Access Journals (Sweden)

    A. Utz

    2017-08-01

    Full Text Available In this paper we present a readout circuit for capacitive micro-electro-mechanical system (MEMS sensors such as accelerometers, gyroscopes or pressure sensors. A flexible interface allows connection of a wide range of types of sensing elements. The ASIC (application-specific integrated circuit was designed with a focus on ultra-low noise operation and high analog measurement performance. Theoretical considerations on system noise are presented which lead to design requirements affecting the reachable overall measurement performance. Special emphasis is put on the design of the fully differential operational amplifiers, as these have the dominant influence on the achievable overall performance. The measured input referred noise is below 50 zF/Hz within a bandwidth of 10 Hz to 10 kHz. Four adjustable gain settings allow the adaption to measurement ranges from ±750 fF to ±3 pF. This ensures compatibility with a wide range of sensor applications. The full input signal bandwidth ranges from 0 Hz to more than 50 kHz. A high-precision accelerometer system was built from the described ASIC and a high-sensitivity, low-noise sensor MEMS. The design of the MEMS is outlined and the overall system performance, which yields a combined noise floor of 200 ng/Hz, is demonstrated. Finally, we show an application using the ASIC together with a CMOS integrated capacitive pressure sensor, which yields a measurement signal-to-noise ratio (SNR of more than 100 dB.

  3. Optically pumped 1550nm wavelength tunable MEMS VCSEL

    DEFF Research Database (Denmark)

    Sahoo, Hitesh Kumar; Ansbæk, Thor; Ottaviano, Luisa

    2016-01-01

    The paper presents the design and fabrication of an optically pumped 1550nm tunable MEMS VCSEL with anenclosed MEMS. The MEMS is defined in SOI and the active material, an InP wafer with quantum wells arebonded to the SOI and the last mirror is made from the deposition of dielectric materials. Th....... The design bringsin flexibility to fabricate MEMS VCSELs over a wider range of wavelengths. The paper discusses results fromthe simulations and bonding results from fabrication. The device will push the boundaries for wavelength sweepspeed and bandwidth.......The paper presents the design and fabrication of an optically pumped 1550nm tunable MEMS VCSEL with anenclosed MEMS. The MEMS is defined in SOI and the active material, an InP wafer with quantum wells arebonded to the SOI and the last mirror is made from the deposition of dielectric materials...

  4. A Widely-Accessible Distributed MEMS Processing Environment. The MEMS Exchange Program

    Science.gov (United States)

    2012-10-29

    steadily rising for several years, our revenue began to drop in 2009, we think mostly due to the bad economy. In years past we would normally see a...the MEMS Materials and Processing Handbook, editors R. Ghodssi and P. Lin, Springer Press, New York, 2011. [3] BioMEMS and Biomaterials for...Medical Applications Biomaterials Science: An Integrated Clinical and Engineering Approach, edited by Yitzhak Rosen and Noel Elman, CRC Press, Boca

  5. MEMS based monolithic Phased array using 3-bit Switched-line Phase Shifter

    Directory of Open Access Journals (Sweden)

    A. Karmakr

    2017-10-01

    Full Text Available This article details the design of an electronically scanning phased array antenna with proposed fabrication process steps. Structure is based upon RF micro-electromechanical system (MEMS technology. Capacitive type shunt switches have been implemented here to cater high frequency operation. The architecture, which is deigned at 30 GHz, consists of 3-bit (11.25º, 22.5º and 45º integrated Switched-line phase shifter and a linearly polarized microstrip patch antenna. Detailed design tricks of the Ka-band phase shifter is outlined here. The whole design is targeted for future monolithic integration. So, the substrate of choice is High Resistive Silicon (ρ > 8kΩ-cm, tan δ =0.01 and ϵr =11.8. The overall circuit occupies an cross-sectional area of 20 × 5 mm2. The simulated results show that the phase shifter can provide nearly 11.25º/22.5º/45º phase shifts and their combinations at the expense of 1dB average insertion loss at 30 GHz for eight combinations. Practical fabrication process flow using surface micromachining is proposed here. Critical dimensions of the phased array structure is governed by the deign rules of the standard CMOS/MEMS foundry.

  6. Simple fall criteria for MEMS sensors: Data analysis and sensor concept

    KAUST Repository

    Ibrahim, Alwathiqbellah

    2014-07-08

    This paper presents a new and simple fall detection concept based on detailed experimental data of human falling and the activities of daily living (ADLs). Establishing appropriate fall algorithms compatible with MEMS sensors requires detailed data on falls and ADLs that indicate clearly the variations of the kinematics at the possible sensor node location on the human body, such as hip, head, and chest. Currently, there is a lack of data on the exact direction and magnitude of each acceleration component associated with these node locations. This is crucial for MEMS structures, which have inertia elements very close to the substrate and are capacitively biased, and hence, are very sensitive to the direction of motion whether it is toward or away from the substrate. This work presents detailed data of the acceleration components on various locations on the human body during various kinds of falls and ADLs. A two-degree-of-freedom model is used to help interpret the experimental data. An algorithm for fall detection based on MEMS switches is then established. A new sensing concept based on the algorithm is proposed. The concept is based on employing several inertia sensors, which are triggered simultaneously, as electrical switches connected in series, upon receiving a true fall signal. In the case of everyday life activities, some or no switches will be triggered resulting in an open circuit configuration, thereby preventing false positive. Lumped-parameter model is presented for the device and preliminary simulation results are presented illustrating the new device concept. © 2014 by the authors; licensee MDPI, Basel, Switzerland.

  7. Characterization of piezoelectric polymer composites for MEMS ...

    Indian Academy of Sciences (India)

    Abstract. Composite piezoelectric ceramics are important materials for transducer applications in medical diag- nostic devices and MEMS devices. In micrometer scale the material properties of piezopolymers or piezoceramics do not coincide with that of bulk materials. The present work is aimed at simulating the material ...

  8. From MEMS to NEMS : Scaling Cantilever Sensors

    NARCIS (Netherlands)

    Yang, C.K.

    2012-01-01

    This thesis studies the effects of scaling on the characterisation and readout of micro-electro mechanical systems (MEMS) to nano-electro mechanical systems (NEMS). In particular it focuses on cantilever, which is a basic device building block and an important transducer in many sensing

  9. Bullet Design of MEMS Cantilever - Hand Calculation

    Directory of Open Access Journals (Sweden)

    Abhijeet V. KSHIRSAGAR

    2008-04-01

    Full Text Available The present article describes the basic hand calculations for design of MEMS cantilever for beginners. The MATLAB software code was written to analysis the all formulae. Further the article gives insight of important parameters, its dependence and consideration for a good design.

  10. Fractal Structures For Mems Variable Capacitors

    KAUST Repository

    Elshurafa, Amro M.

    2014-08-28

    In accordance with the present disclosure, one embodiment of a fractal variable capacitor comprises a capacitor body in a microelectromechanical system (MEMS) structure, wherein the capacitor body has an upper first metal plate with a fractal shape separated by a vertical distance from a lower first metal plate with a complementary fractal shape; and a substrate above which the capacitor body is suspended.

  11. Review on the Modeling of Electrostatic MEMS

    Science.gov (United States)

    Chuang, Wan-Chun; Lee, Hsin-Li; Chang, Pei-Zen; Hu, Yuh-Chung

    2010-01-01

    Electrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduces the physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices. PMID:22219707

  12. MEMS Piezoresistive Pressure Sensor: A Survey

    OpenAIRE

    Shwetha Meti; Kirankumar B. Balavald; B. G. Sheeparmatti

    2016-01-01

    Piezoresistive pressure sensors are one of the very first products of MEMS technology, and are used in various fields like automotive industries, aerospace, biomedical applications, and household appliances. Amongst various transduction principles of pressure sensor piezoresistive transduction mechanism is widely used. Over a decade therehas been tremendous improvement in the development of the design of piezoresistive pressure sensor starting with the invention of piezoresistance...

  13. SiC MEMS For Harsh Environments

    National Research Council Canada - National Science Library

    Bradley, Kenneth

    2003-01-01

    This document is the final technical report for the SiC MEMS for Harsh Environments in-house research program jointly coordinated between AFRL/MNMF and AFRL/MLPS, and addresses the benefits of silicon carbide (SiC...

  14. MEMS deformable mirror CubeSat testbed

    Science.gov (United States)

    Cahoy, Kerri L.; Marinan, Anne D.; Novak, Benjamin; Kerr, Caitlin; Nguyen, Tam; Webber, Matthew; Falkenburg, Grant; Barg, Andrew; Berry, Kristen; Carlton, Ashley; Belikov, Ruslan; Bendek, Eduardo A.

    2013-09-01

    To meet the high contrast requirement of 1 × 10-10to image an Earth-like planet around a Sun-like star, space telescopes equipped with coronagraphs require wavefront control systems. Deformable mirrors are a key element of these systems that correct for optical imperfections, thermal distortions, and diffraction that would otherwise corrupt the wavefront and ruin the contrast. However, high-actuator-count MEMS deformable mirrors have yet to fly in space long enough to characterize their on-orbit performance and reduce risk by developing and operating their supporting systems. The goal of the MEMS Deformable Mirror CubeSat Testbed is to develop a CubeSat-scale demonstration of MEMS deformable mirror and wavefront sensing technology. In this paper, we consider two approaches for a MEMS deformable mirror technology demonstration payload that will fit within the mass, power, and volume constraints of a CubeSat: 1) a Michelson interferometer and 2) a Shack-Hartmann wavefront sensor. We clarify the constraints on the payload based on the resources required for supporting CubeSat subsystems drawn from subsystems that we have developed for a different CubeSat flight project. We discuss results from payload lab prototypes and their utility in defining mission requirements.

  15. Capacitance dilatometry in a surface force apparatus

    International Nuclear Information System (INIS)

    Stewart, A.M.

    2003-01-01

    Full text: A variant of the surface force apparatus has been developed which enables measurements of the forces between opaque surfaces to be obtained. A capacitance dilatometry attachment for the surface force apparatus has been constructed in which the surface that moves under the influence of the applied force is attached to one plate of a capacitor whose capacitance thereby changes. In order to detect movements of 0.1 nm of the plates of a capacitor with gap 0.1 mm the capacitance has to be measured to one part in one million, noting further that the measured capacitance is several hundred times smaller than the associated stray capacitances. This resolution is achieved by means of a transformer ratio bridge and, provided that adequate vibration isolation can be achieved, displacements of 0.1 nm can be resolved reliably. This is the case even with air between the surfaces, air giving much less vibrational damping than liquids. The method has been applied to measure the forces between mica in electrolyte and to measure dispersion forces of mica and silica in air. In the latter case the results are of unprecedented accuracy for this technique and show unambiguously that for surface separations greater than 10 nm the retarded form of the dispersion force fits the measurements much better than the non-retarded form

  16. Spiral-Shaped Piezoelectric MEMS Cantilever Array for Fully Implantable Hearing Systems

    Directory of Open Access Journals (Sweden)

    Péter Udvardi

    2017-10-01

    Full Text Available Fully implantable, self-powered hearing aids with no external unit could significantly increase the life quality of patients suffering severe hearing loss. This highly demanding concept, however, requires a strongly miniaturized device which is fully implantable in the middle/inner ear and includes the following components: frequency selective microphone or accelerometer, energy harvesting device, speech processor, and cochlear multielectrode. Here we demonstrate a low volume, piezoelectric micro-electromechanical system (MEMS cantilever array which is sensitive, even in the lower part of the voice frequency range (300–700 Hz. The test array consisting of 16 cantilevers has been fabricated by standard bulk micromachining using a Si-on-Insulator (SOI wafer and aluminum nitride (AlN as a complementary metal-oxide-semiconductor (CMOS and biocompatible piezoelectric material. The low frequency and low device footprint are ensured by Archimedean spiral geometry and Si seismic mass. Experimentally detected resonance frequencies were validated by an analytical model. The generated open circuit voltage (3–10 mV is sufficient for the direct analog conversion of the signals for cochlear multielectrode implants.

  17. TOPICAL REVIEW: Capacitive micromachined ultrasonic transducer arrays for minimally invasive medical ultrasound

    Science.gov (United States)

    Chen, Jingkuang

    2010-02-01

    This paper reviews the minimally invasive capacitive micromachined ultrasonic transducer (CMUT) arrays for medical diagnosis and therapy. While piezoelectric transducers dominate today's medical ultrasound market, the capacitive micromachined ultrasonic transducer has recently emerged as a promising alternative which delivers a comparable device performance to its piezoelectric counterparts, is compatible with front-end circuit integration, allows high-density imager integration and is relative easy in miniaturization. Utilizing MEMS technology, the substrate of CMUT arrays can be micromachined into miniature platforms with various geometrical shapes, which include needles, three-dimensional prisms, as well as other flexible-substrate configurations. These arrays are useful for reaching deep inside the tissue or an organ with a minimally invasive approach. Due to the close proximity of the transducers to the target organ/tissue, a higher resolution/accuracy of diagnostic information can be achieved. In addition to pulse-echo and photoacoustic imaging, high-power CMUT devices capable of delivering ultrasounds with a pressure greater than 1.0 MPa have been monolithically integrated with imager CMUTs for image-guided therapy (IGT). Such miniature devices would facilitate diagnostic and therapy interventions not possible with conventional piezoelectric transducers.

  18. MEMS Actuators for Improved Performance and Durability

    Science.gov (United States)

    Yearsley, James M.

    Micro-ElectroMechanical Systems (MEMS) devices take advantage of force-scaling at length scales smaller than a millimeter to sense and interact with directly with phenomena and targets at the microscale. MEMS sensors found in everyday devices like cell-phones and cars include accelerometers, gyros, pressure sensors, and magnetic sensors. MEMS actuators generally serve more application specific roles including micro- and nano-tweezers used for single cell manipulation, optical switching and alignment components, and micro combustion engines for high energy density power generation. MEMS rotary motors are actuators that translate an electric drive signal into rotational motion and can serve as rate calibration inputs for gyros, stages for optical components, mixing devices for micro-fluidics, etc. Existing rotary micromotors suffer from friction and wear issues that affect lifetime and performance. Attempts to alleviate friction effects include surface treatment, magnetic and electrostatic levitation, pressurized gas bearings, and micro-ball bearings. The present work demonstrates a droplet based liquid bearing supporting a rotary micromotor that improves the operating characteristics of MEMS rotary motors. The liquid bearing provides wear-free, low-friction, passive alignment between the rotor and stator. Droplets are positioned relative to the rotor and stator through patterned superhydrophobic and hydrophilic surface coatings. The liquid bearing consists of a central droplet that acts as the motor shaft, providing axial alignment between rotor and stator, and satellite droplets, analogous to ball-bearings, that provide tip and tilt stable operation. The liquid bearing friction performance is characterized through measurement of the rotational drag coefficient and minimum starting torque due to stiction and geometric effects. Bearing operational performance is further characterized by modeling and measuring stiffness, environmental survivability, and high

  19. Negative capacitance in a ferroelectric capacitor.

    Science.gov (United States)

    Khan, Asif Islam; Chatterjee, Korok; Wang, Brian; Drapcho, Steven; You, Long; Serrao, Claudy; Bakaul, Saidur Rahman; Ramesh, Ramamoorthy; Salahuddin, Sayeef

    2015-02-01

    The Boltzmann distribution of electrons poses a fundamental barrier to lowering energy dissipation in conventional electronics, often termed as Boltzmann Tyranny. Negative capacitance in ferroelectric materials, which stems from the stored energy of a phase transition, could provide a solution, but a direct measurement of negative capacitance has so far been elusive. Here, we report the observation of negative capacitance in a thin, epitaxial ferroelectric film. When a voltage pulse is applied, the voltage across the ferroelectric capacitor is found to be decreasing with time--in exactly the opposite direction to which voltage for a regular capacitor should change. Analysis of this 'inductance'-like behaviour from a capacitor presents an unprecedented insight into the intrinsic energy profile of the ferroelectric material and could pave the way for completely new applications.

  20. Noise properties of textile, capacitive EEG electrodes

    Directory of Open Access Journals (Sweden)

    Asl Sara Nazari

    2015-09-01

    Full Text Available The rigid surface of the conventional PCB-based capacitive electrode produces an undefined distance between the skin and the electrode surface. Therefore, the capacitance introduced by them is uncertain and can vary from electrode to electrode due to their different positions on the scalp. However, textile electrodes which use conductive fabric as electrode surfaces, are bendable over the scalp. Therefore, it provides a certain value of the capacitance which is predictable and calculable accurately if the effective distance to the scalp surface can be determined. In this paper noise characteristics of textile electrodes with different fabric sizes as electrode’s surface and capacity calculations related to each size are presented to determine the effective distances for each electrode size.

  1. Carbon nanofiber supercapacitors with large areal capacitances

    KAUST Repository

    McDonough, James R.

    2009-01-01

    We develop supercapacitor (SC) devices with large per-area capacitances by utilizing three-dimensional (3D) porous substrates. Carbon nanofibers (CNFs) functioning as active SC electrodes are grown on 3D nickel foam. The 3D porous substrates facilitate a mass loading of active electrodes and per-area capacitance as large as 60 mg/ cm2 and 1.2 F/ cm2, respectively. We optimize SC performance by developing an annealing-free CNF growth process that minimizes undesirable nickel carbide formation. Superior per-area capacitances described here suggest that 3D porous substrates are useful in various energy storage devices in which per-area performance is critical. © 2009 American Institute of Physics.

  2. Capacitance matrix method in TRAC and MELPROG

    International Nuclear Information System (INIS)

    Steinke, R.G.; Dearing, J.F.

    1989-01-01

    The capacitance matrix method has been used in the TRAC and MELPROG transient, thermal-hydraulic, safety-analysis computer programs to solve the multi-dimensional-vessel matrix equations. A full-matrix solver rather than a more efficient banded-matrix solver was used previously because of nonzero elements lying outside the matrix bandwidth. These outlying nonzero elements result from vessel external and internal pipe flow channels connecting non-adjacent cells in the multidimensional vessel component. The capacitance matrix method provides a more efficient solution algorithm by solving the banded portion of the vessel-matrix equation with a banded-matrix solver. The effect of the nonzero outlying elements on that solution is accounted for through matrix algebra and a lower order capacitance-matrix equation solution that modifies the banded-matrix solution to give the full-matrix solution. 5 refs., 2 figs

  3. Sandia Agile MEMS Prototyping, Layout Tools, Education and Services Program

    Energy Technology Data Exchange (ETDEWEB)

    Schriner, H.; Davies, B.; Sniegowski, J.; Rodgers, M.S.; Allen, J.; Shepard, C.

    1998-05-01

    Research and development in the design and manufacture of Microelectromechanical Systems (MEMS) is growing at an enormous rate. Advances in MEMS design tools and fabrication processes at Sandia National Laboratories` Microelectronics Development Laboratory (MDL) have broadened the scope of MEMS applications that can be designed and manufactured for both military and commercial use. As improvements in micromachining fabrication technologies continue to be made, MEMS designs can become more complex, thus opening the door to an even broader set of MEMS applications. In an effort to further research and development in MEMS design, fabrication, and application, Sandia National Laboratories has launched the Sandia Agile MEMS Prototyping, Layout Tools, Education and Services Program or SAMPLES program. The SAMPLES program offers potential partners interested in MEMS the opportunity to prototype an idea and produce hardware that can be used to sell a concept. The SAMPLES program provides education and training on Sandia`s design tools, analysis tools and fabrication process. New designers can participate in the SAMPLES program and design MEMS devices using Sandia`s design and analysis tools. As part of the SAMPLES program, participants` designs are fabricated using Sandia`s 4 level polycrystalline silicon surface micromachine technology fabrication process known as SUMMiT (Sandia Ultra-planar, Multi-level MEMS Technology). Furthermore, SAMPLES participants can also opt to obtain state of the art, post-fabrication services provided at Sandia such as release, packaging, reliability characterization, and failure analysis. This paper discusses the components of the SAMPLES program.

  4. MOS Current Mode Logic with Capacitive Coupling

    OpenAIRE

    Kirti Gupta; Neeta Pandey; Maneesha Gupta

    2012-01-01

    A new MOS current mode logic (MCML) style exhibiting capacitive coupling to enhance the switching speed of the digital circuits is proposed. The mechanism of capacitive coupling and its effect on the delay are analytically modeled. SPICE simulations to validate the accuracy of the analytical model have been carried out with TSMC 0.18 μm CMOS technology parameters. Several logic gates such as five-stage ring oscillator, NAND, XOR2, XOR3, multiplexer, and demultiplexer based on the proposed log...

  5. A novel MEMS S-springs vibrating ring gyroscope with atmosphere package

    Directory of Open Access Journals (Sweden)

    Zhiwei Kou

    2017-12-01

    Full Text Available This study presents a new MEMS vibrating ring gyroscope (VRG, which is driven by electrostatic force and detected by capacitance. A novel ring resonator with eight S-shaped symmetrical supporting springs is developed based on the advantageous characteristics of a thin-shell vibrating gyroscope. The capacitance electrodes, including the drive electrodes, the sense electrodes and the mode control electrodes, are designed according to the vibration characteristics of the ring resonator and the shape of the supporting springs. In addition, the operational principle of these electrode capacitors and the electrostatic force of the drive electrodes are discussed in detail. The gyroscope with high aspect-ratio structures is manufactured through an efficient fabrication process. Finally, the performance characteristics of the fabricated VRG are tested, and the experimentally obtained the zero-bias instability is about 0.0167°/s and angle random walk (ARW is about 0.1363°/s1/2 at room temperature. Experimental results show that the VRG has a simple structure and relatively better performance characteristics for low and medium angular velocity measurements.

  6. A novel MEMS S-springs vibrating ring gyroscope with atmosphere package

    Science.gov (United States)

    Kou, Zhiwei; Liu, Jun; Cao, Huiliang; Shi, Yunbo; Ren, Jianjun; Zhang, Yingjie

    2017-12-01

    This study presents a new MEMS vibrating ring gyroscope (VRG), which is driven by electrostatic force and detected by capacitance. A novel ring resonator with eight S-shaped symmetrical supporting springs is developed based on the advantageous characteristics of a thin-shell vibrating gyroscope. The capacitance electrodes, including the drive electrodes, the sense electrodes and the mode control electrodes, are designed according to the vibration characteristics of the ring resonator and the shape of the supporting springs. In addition, the operational principle of these electrode capacitors and the electrostatic force of the drive electrodes are discussed in detail. The gyroscope with high aspect-ratio structures is manufactured through an efficient fabrication process. Finally, the performance characteristics of the fabricated VRG are tested, and the experimentally obtained the zero-bias instability is about 0.0167°/s and angle random walk (ARW) is about 0.1363°/s1/2 at room temperature. Experimental results show that the VRG has a simple structure and relatively better performance characteristics for low and medium angular velocity measurements.

  7. Highly sensitive micromachined capacitive pressure sensor with reduced hysteresis and low parasitic capacitance

    DEFF Research Database (Denmark)

    Pedersen, Thomas; Fragiacomo, Giulio; Hansen, Ole

    2009-01-01

    This paper describes the design and fabrication of a capacitive pressure sensor that has a large capacitance signal and a high sensitivity of 76 pF/bar in touch mode operation. Due to the large signal, problems with parasitic capacitances are avoided and hence it is possible to integrate the sensor...... with a discrete components electronics circuit for signal conditioning. Using an AC bridge electronics circuit a resolution of 8 mV/mbar is achieved. The large signal is obtained due to a novel membrane structure utilizing closely packed hexagonal elements. The sensor is fabricated in a process based on fusion...

  8. MEMS for Tunable Photonic Metamaterial Applications

    Science.gov (United States)

    Stark, Thomas

    Photonic metamaterials are materials whose optical properties are derived from artificially-structured sub-wavelength unit cells, rather than from the bulk properties of the constituent materials. Examples of metamaterials include plasmonic materials, negative index materials, and electromagnetic cloaks. While advances in simulation tools and nanofabrication methods have allowed this field to grow over the past several decades, many challenges still exist. This thesis addresses two of these challenges: fabrication of photonic metamaterials with tunable responses and high-throughput nanofabrication methods for these materials. The design, fabrication, and optical characterization of a microelectromechanical systems (MEMS) tunable plasmonic spectrometer are presented. An array of holes in a gold film, with plasmon resonance in the mid-infrared, is suspended above a gold reflector, forming a Fabry-Perot interferometer of tunable length. The spectra exhibit the convolution of extraordinary optical transmission through the holes and Fabry-Perot resonances. Using MEMS, the interferometer length is modulated from 1.7 mum to 21.67 mum , thereby tuning the free spectral range from about 2900 wavenumbers to 230.7 wavenumbers and shifting the reflection minima and maxima across the infrared. Due to its broad spectral tunability in the fingerprint region of the mid-infrared, this device shows promise as a tunable biological sensing device. To address the issue of high-throughput, high-resolution fabrication of optical metamaterials, atomic calligraphy, a MEMS-based dynamic stencil lithography technique for resist-free fabrication of photonic metamaterials on unconventional substrates, has been developed. The MEMS consists of a moveable stencil, which can be actuated with nanometer precision using electrostatic comb drive actuators. A fabrication method and flip chip method have been developed, enabling evaporation of metals through the device handle for fabrication on an

  9. A numerical study of the random-incidence and diffuse-field sensitivity of laboratory standard microphones using BEM

    DEFF Research Database (Denmark)

    Barrera Figueroa, Salvador; Henriquez, Vicente Cutanda; Jacobsen, Finn

    2006-01-01

    to the definition of the latter, a number of plane waves coming from random directions and having random phases impinge simultaneously upon the microphone. The random-incidence sensitivity can be estimated using measurements made in an anechoic chamber, while the diffuse-field sensitivity requires a reverberation......The difference between the random-incidence sensitivity of a microphone and the diffusefield sensitivity is that according to the definition of the former, plane waves coming from different angles of incidence impinge successively onto the microphone under free-field conditions, whereas according...... Element Method has been used to study different aspects of the two realizations, such as the influence of the number of plane waves impinging on the microphone, the required amount of spatial averaging, etc....

  10. Free-field reciprocity calibration of laboratory standard (LS) microphones using a time selective technique

    DEFF Research Database (Denmark)

    Rasmussen, Knud; Barrera Figueroa, Salvador

    2006-01-01

    Although the basic principle of reciprocity calibration of microphones in a free field is simple, the practical problems are complicated due to the low signal-to-noise ratio and the influence of cross talk and reflections from the surroundings. The influence of uncorrelated noise can be reduced...... by conventional narrow-band filtering and time averaging, while correlated signals like cross talk and reflections can be eliminated by using time-selective postprocessing techniques. The technique used at DPLA overcomes both these problems using a B&K Pulse analyzer in the SSR mode (steady state response......) and an FFT-based time-selective technique. The complex electrical transfer impedance is measured in linear frequency steps from a few kHz to about three times the resonance frequency of the microphones. The missing values at low frequencies are estimated from a detailed knowledge of the pressure...

  11. Reconstruction of the signal produced by a directional sound source from remote multi-microphone recordings.

    Science.gov (United States)

    Guarato, Francesco; Hallam, John; Matsuo, Ikuo

    2011-09-01

    A mathematical method for reconstructing the signal produced by a directional sound source from knowledge of the same signal in the far field, i.e., microphone recordings, is developed. The key idea is to compute inverse filters that compensate for the directional filtering of the signal by the sound source directivity, using a least-square error optimization strategy. Previous work pointed out how the method strongly depends on arrival times of signal in the microphone recordings. Two strategies are used in this paper for calculating the time shifts that are afterward taken as inputs, together with source directivity, for the reconstruction. The method has been tested in a laboratory environment, where ground truth was available, with a Polaroid transducer as source. The reconstructions are similar with both strategies. The performance of the method also depends on source orientation. © 2011 Acoustical Society of America

  12. Modified Skvor/Starr approach in the mechanical-thermal noise analysis of condenser microphone.

    Science.gov (United States)

    Tan, Chee Wee; Miao, Jianmin

    2009-11-01

    Simple analytical expressions of mechanical resistance, such as those formulated by Skvor/Starr, are widely used to describe the mechanical-thermal noise performance of a condenser microphone. However, the Skvor/Starr approach does not consider the location effect of acoustic holes in the backplate and overestimates the total equivalent mechanical resistance and mechanical-thermal noise. In this paper, a modified form of the Skvor/Starr approach is proposed to address this hole location dependent effect. A mode shape factor, which consists of the zero order Bessel and modified Bessel functions, is included in Skvor's mechanical resistance formulation to consider the effect of the hole location in the backplate. With reference to two B&K microphones, the theoretical results of the A-weighted mechanical-thermal noise obtained by the modified Skvor/Starr approach are in good agreements with those reported experimental ones.

  13. Characteristics and measurement of supersonic projectile shock waves by a 32-microphone ring array

    Science.gov (United States)

    Chang, Ho; Wu, Yan-Chyuan; Tsung, Tsing-Tshih

    2011-08-01

    This paper discusses about the characteristics of supersonic projectile shock wave in muzzle region during firing of high explosive anti-tank (HEAT) and high explosive (HE) projectiles. HEAT projectiles are fired horizontally at a muzzle velocity of Mach 3.5 from a medium caliber tank gun equipped with a newly designed multi-perforated muzzle brake, whereas HE projectiles are fired at elevation angles at a muzzle velocity of Mach 2 from a large caliber howitzer equipped with a newly designed double-baffle muzzle brake. In the near field, pressure signatures of the N-wave generated from projectiles are measured by 32-microphone ring array wrapped by cotton sheath. Records measured by the microphone array are used to demonstrate several key characteristics of the shock wave of supersonic projectile. All measurements made in this study can be a significant reference for developing guns, tanks, or the chassis of fighting vehicles.

  14. Negative capacitance in multidomain ferroelectric superlattices.

    Science.gov (United States)

    Zubko, Pavlo; Wojdeł, Jacek C; Hadjimichael, Marios; Fernandez-Pena, Stéphanie; Sené, Anaïs; Luk'yanchuk, Igor; Triscone, Jean-Marc; Íñiguez, Jorge

    2016-06-23

    The stability of spontaneous electrical polarization in ferroelectrics is fundamental to many of their current applications, which range from the simple electric cigarette lighter to non-volatile random access memories. Research on nanoscale ferroelectrics reveals that their behaviour is profoundly different from that in bulk ferroelectrics, which could lead to new phenomena with potential for future devices. As ferroelectrics become thinner, maintaining a stable polarization becomes increasingly challenging. On the other hand, intentionally destabilizing this polarization can cause the effective electric permittivity of a ferroelectric to become negative, enabling it to behave as a negative capacitance when integrated in a heterostructure. Negative capacitance has been proposed as a way of overcoming fundamental limitations on the power consumption of field-effect transistors. However, experimental demonstrations of this phenomenon remain contentious. The prevalent interpretations based on homogeneous polarization models are difficult to reconcile with the expected strong tendency for domain formation, but the effect of domains on negative capacitance has received little attention. Here we report negative capacitance in a model system of multidomain ferroelectric-dielectric superlattices across a wide range of temperatures, in both the ferroelectric and paraelectric phases. Using a phenomenological model, we show that domain-wall motion not only gives rise to negative permittivity, but can also enhance, rather than limit, its temperature range. Our first-principles-based atomistic simulations provide detailed microscopic insight into the origin of this phenomenon, identifying the dominant contribution of near-interface layers and paving the way for its future exploitation.

  15. Electrical characteristics for capacitively coupled radio frequency ...

    Indian Academy of Sciences (India)

    MURAT TANISLI

    2017-08-16

    Aug 16, 2017 ... cally parallel. Here, the RF voltage is usually applied to one of the two electrodes and the other electrode is used for grounding. The plasma sheath and bulk plasma ... Nonlinear plasma series resonance (PSR) effect ... Equivalent circuit for the capacitively coupled RF discharge of the homogenous model.

  16. Locating Depots for Capacitated Vehicle Routing

    DEFF Research Database (Denmark)

    Gørtz, Inge Li; Nagarajan, Viswanath

    2011-01-01

    We study a location-routing problem in the context of capacitated vehicle routing. The input to k-LocVRP is a set of demand locations in a metric space and a fleet of k vehicles each of capacity Q. The objective is to locate k depots, one for each vehicle, and compute routes for the vehicles so t...

  17. Capacitors and Resistance-Capacitance Networks.

    Science.gov (United States)

    Balabanian, Norman; Root, Augustin A.

    This programed textbook was developed under a contract with the United States Office of Education as Number 5 in a series of materials for use in an electrical engineering sequence. It is divided into three parts--(1) capacitors, (2) voltage-current relationships, and (3) simple resistance-capacitance networks. (DH)

  18. Capacitive system detects and locates fluid leaks

    Science.gov (United States)

    1966-01-01

    Electronic monitoring system automatically detects and locates minute leaks in seams of large fluid storage tanks and pipelines covered with thermal insulation. The system uses a capacitive tape-sensing element that is adhesively bonded over seams where fluid leaks are likely to occur.

  19. Inside-out electrical capacitance tomography

    DEFF Research Database (Denmark)

    Kjærsgaard-Rasmussen, Jimmy; Meyer, Knud Erik

    2011-01-01

    ; allowing the inside-out sensor to move inside the outer tube. A test sensor was constructed and capacitances were measured using the charge transfer technique. Sensitivity matrices for the inside-out sensor were calculated with a finite element approach and some special issues with the sensitivity matrices...

  20. Electrical characteristics for capacitively coupled radio frequency ...

    Indian Academy of Sciences (India)

    In this study, a symmetric radio frequency (RF) (13.56 MHz) electrode discharge system of simple geometry has been designed and made. The electrical properties of capacitive RF discharge of pure neon and pure helium have been obtained from current and voltage waveforms using different reactor designs. Calculations ...

  1. Droplet-based interfacial capacitive sensing.

    Science.gov (United States)

    Nie, Baoqing; Xing, Siyuan; Brandt, James D; Pan, Tingrui

    2012-03-21

    This paper presented a novel droplet-based pressure sensor using elastic and capacitive electrode-electrolyte interfaces to achieve ultrahigh mechanical-to-electrical sensitivity (1.58 μF kPa(-1)) and resolution (1.8 Pa) with a simple device architecture. The miniature transparent droplet sensors, fabricated by one-step laser micromachining, consisted of two flexible polymer membranes with conductive coating and a separation layer hosting a sensing chamber for an electrolyte droplet. The sensing principle primarily relied on high elasticity of the sensing droplet and large capacitance presented at the electrode-electrolyte interface. A simple surface modification scheme was introduced to the conductive coating, which reduced hysteresis of the droplet deformation without substantially compromising the interfacial capacitance. Moreover, the major concern of liquid evaporation was addressed by a mixture of glycerol and electrolyte with long-term stability in a laboratory environment. Theoretical analyses and experimental investigations on several design parameters (i.e., the dimensions of the sensing chamber and the droplet size) were thoroughly conducted to characterize and optimize the overall sensitivity of the device. Moreover, the environmental influences (e.g., temperature and humidity) on the capacitive measurement were further investigated. Finally, the simply constructed and mechanically flexible droplet sensor was successfully applied to detect minute blood pressure variations on the skin surface (with the maximum value less than 100 Pa) throughout cardiovascular cycles.

  2. Comparison of gate capacitance extraction methodologies

    NARCIS (Netherlands)

    Kazmi, S.N.R.; Schmitz, Jurriaan

    2008-01-01

    In recent years, many new capacitance-voltage measurement approaches have been presented in literature. New approaches became necessary with the rapidly increasing gate current density in newer CMOS generations. Here we present a simulation platform using Silvaco software, to describe the full chain

  3. Automation of capacitance measurements for power semiconductor ...

    African Journals Online (AJOL)

    The paper addresses the matters of circuit engineering of primary components, technical characteristics and software of a meter designed to automate the process of testing of capacitance parameters of power modules based on insulated gate bipolar transistors and fast recovery diodes. Unit testing results that prove the ...

  4. Negative Quantum Capacitance of Carbon Nanotube Field-Effect Transistors

    OpenAIRE

    Latessa, L.; Pecchia, A.; Di Carlo, A.; Lugli, P.

    2004-01-01

    Atomistic density functional theory (DFT) calculations of the capacitance between a metallic cylindric gate and a carbon nanotube (CNT) are reported. Results stressing the predominant effect of quantum capacitance in limiting or even enhancing screening properties of the CNT are shown. Other contributions to the quantum capacitance beyond the electronic density of state (DOS) are pointed out. Negative values of the quantum capacitance are obtained for low-density systems, which correspondingl...

  5. Assessment of Operational Progress of NASA Langley Developed Windshield and Microphone for Infrasound

    Science.gov (United States)

    2013-04-01

    and Seismic Sensing, Magnetic and Electric Sensors, 2008. 7. Help Documentation, MATLAB ® R2011b, MathWorks (2011). No. of Copies Organization...using the MATLAB ,* Signal Processing Toolbox function “tfestimate” (7). This function returns a complex transfer function, from which the magnitude...between the two microphones at the same separations. * MATLAB is a registered trademark of The MathWorks

  6. Microphone Handling Noise: Measurements of Perceptual Threshold and Effects on Audio Quality.

    Science.gov (United States)

    Kendrick, Paul; Jackson, Iain R; Fazenda, Bruno M; Cox, Trevor J; Li, Francis F

    2015-01-01

    A psychoacoustic experiment was carried out to test the effects of microphone handling noise on perceived audio quality. Handling noise is a problem affecting both amateurs using their smartphones and cameras, as well as professionals using separate microphones and digital recorders. The noises used for the tests were measured from a variety of devices, including smartphones, laptops and handheld microphones. The signal features that characterise these noises are analysed and presented. The sounds include various types of transient, impact noises created by tapping or knocking devices, as well as more sustained sounds caused by rubbing. During the perceptual tests, listeners auditioned speech podcasts and were asked to rate the degradation of any unwanted sounds they heard. A representative design test methodology was developed that tried to encourage everyday rather than analytical listening. Signal-to-noise ratio (SNR) of the handling noise events was shown to be the best predictor of quality degradation. Other factors such as noise type or background noise in the listening environment did not significantly affect quality ratings. Podcast, microphone type and reproduction equipment were found to be significant but only to a small extent. A model allowing the prediction of degradation from the SNR is presented. The SNR threshold at which 50% of subjects noticed handling noise was found to be 4.2 ± 0.6 dBA. The results from this work are important for the understanding of our perception of impact sound and resonant noises in recordings, and will inform the future development of an automated predictor of quality for handling noise.

  7. Microphone Handling Noise: Measurements of Perceptual Threshold and Effects on Audio Quality.

    Directory of Open Access Journals (Sweden)

    Paul Kendrick

    Full Text Available A psychoacoustic experiment was carried out to test the effects of microphone handling noise on perceived audio quality. Handling noise is a problem affecting both amateurs using their smartphones and cameras, as well as professionals using separate microphones and digital recorders. The noises used for the tests were measured from a variety of devices, including smartphones, laptops and handheld microphones. The signal features that characterise these noises are analysed and presented. The sounds include various types of transient, impact noises created by tapping or knocking devices, as well as more sustained sounds caused by rubbing. During the perceptual tests, listeners auditioned speech podcasts and were asked to rate the degradation of any unwanted sounds they heard. A representative design test methodology was developed that tried to encourage everyday rather than analytical listening. Signal-to-noise ratio (SNR of the handling noise events was shown to be the best predictor of quality degradation. Other factors such as noise type or background noise in the listening environment did not significantly affect quality ratings. Podcast, microphone type and reproduction equipment were found to be significant but only to a small extent. A model allowing the prediction of degradation from the SNR is presented. The SNR threshold at which 50% of subjects noticed handling noise was found to be 4.2 ± 0.6 dBA. The results from this work are important for the understanding of our perception of impact sound and resonant noises in recordings, and will inform the future development of an automated predictor of quality for handling noise.

  8. Determining Sound Source Orientation from Analytical Source Directivity and Real Multi-Microphone Recordings

    DEFF Research Database (Denmark)

    Guarato, Francesco; Hallam, John; Vanderelst, Dieter

    2009-01-01

    been performed in an ordinary environment by using a Polaroid transducer as the sound source emitting a broadband signal in the ultrasonic range. Such an acoustic signal has similar structure to those used by bats to echolocate. Results show that method is precise provided that the source directivity...... ensonifies the microphone array sufficiently. Further developments of the method, and its ultimate application to the reconstruction of emitted bat calls from remote recordings, are discussed....

  9. Determining Sound Source Orientation from Source Directivity and Multi-microphone Recordings

    DEFF Research Database (Denmark)

    Guarato, Francesco; Hallam, John

    been performed in an ordinary environment by using a Polaroid transducer as the sound source emitting a broadband signal in the ultrasonic range. Such an acoustic signal has similar structure to those used by bats to echolocate. Results show that method is precise provided that the source directivity...... ensonifies the microphone array sufficiently. Further developments of the method, and its ultimate application to the reconstruction of emitted bat calls from remote recordings, are discussed....

  10. Ad Hoc Microphone Array Beamforming Using the Primal-Dual Method of Multipliers

    DEFF Research Database (Denmark)

    Tavakoli, Vincent Mohammad; Jensen, Jesper Rindom; Heusdens, Richard

    2016-01-01

    In the recent years, there have been increasing amount of researches aiming at optimal beamforming with ad hoc microphone arrays, mostly with fusion-based schemes. However, huge amount of computational complexity and communication overhead impede many of these algorithms from being useful in prac...... the distributed linearly-constrained minimum variance beamformer using the the state of the art primal-dual method of multipliers. We study the proposed algorithm with an experiment....

  11. Microphonics detuning compensation in 3.9 GHZ superconducting RF cavities

    Energy Technology Data Exchange (ETDEWEB)

    Ruben Carcagno et al.

    2003-10-20

    Mechanical vibrations can detune superconducting radio frequency (SCRF) cavities unless a tuning mechanism counteracting the vibrations is present. Due to their narrow operating bandwidth and demanding mechanical structure, the 13-cell 3.9GHz SCRF cavities for the Charged Kaons at Main Injector (CKM) experiment at Fermilab are especially susceptible to this microphonic phenomena. We present early results correlating RF frequency detuning with cavity vibration measurements for CKM cavities; initial detuning compensation results with piezoelectric actuators are also presented.

  12. Electroplating of low stress permalloy for MEMS

    International Nuclear Information System (INIS)

    Zhang Yonghua; Ding Guifu; Cai Yuli; Wang Hong; Cai Bingchu

    2006-01-01

    With the wafer-bending method and spectrophotometry, the internal stress in electroplated Ni-Fe alloy for MEMS has been investigated as a function of bath concentration. This investigation demonstrated that low concentration plating solution is useful for the decrease of the residual stress in the electrodeposits, and the stress could further decrease with an increase of saccharin additive content. And the change of stress from tensile to compressive was not observed with the increase of the additive content in plating path. The low stress permalloy (Ni 81 Fe 19 ) was reached in our experimental conditions. A bistable electromagnetic RF MEMS switch with deformation-free bilayer cantilever beam was fabricated successfully by electroplated permalloy

  13. MEMS wireless temperature sensor for combustion studies

    Science.gov (United States)

    Lee, Minhyeok; Kawahara, Yoshihiro; Morimoto, Kenichi; Suzuki, Yuji

    2014-11-01

    A MEMS wireless wall temperature sensor for combustion studies is proposed. Electrical resistance change in a LCR circuit is used to measure the temperature through inductive coupling the sensor coil and the read-out coil. Equivalent circuit model and 3-D electromagnetic simulation are employed to design sensor configuration. The resonant frequency is increased with increasing the resistance due to the temperature increase. The prototype sensor was successfully fabricated with MEMS technologies. The impedance phase angle shows a sharp dip at the resonant frequency, which is in good accordance with the equivalent circuit model. The measured temperature sensitivity is found to be as high as 6 kHz/K, when the distance between the read-out and the sensor coils is 0.71 mm.

  14. MEMS Packaging - Current Issues and Approaches

    Energy Technology Data Exchange (ETDEWEB)

    DRESSENDORFER,PAUL V.; PETERSON,DAVID W.; REBER,CATHLEEN ANN

    2000-01-19

    The assembly and packaging of MEMS (Microelectromechanical Systems) devices raise a number of issues over and above those normally associated with the assembly of standard microelectronic circuits. MEMS components include a variety of sensors, microengines, optical components, and other devices. They often have exposed mechanical structures which during assembly require particulate control, space in the package, non-contact handling procedures, low-stress die attach, precision die placement, unique process schedules, hermetic sealing in controlled environments (including vacuum), and other special constraints. These constraints force changes in the techniques used to separate die on a wafer, in the types of packages which can be used in the assembly processes and materials, and in the sealing environment and process. This paper discusses a number of these issues and provides information on approaches being taken or proposed to address them.

  15. Giant Piezoelectricity on Si for Hyperactive MEMS

    Science.gov (United States)

    Baek, S. H.; Park, J.; Kim, D. M.; Aksyuk, V. A.; Das, R. R.; Bu, S. D.; Felker, D. A.; Lettieri, J.; Vaithyanathan, V.; Bharadwaja, S. S. N.; Bassiri-Gharb, N.; Chen, Y. B.; Sun, H. P.; Folkman, C. M.; Jang, H. W.; Kreft, D. J.; Streiffer, S. K.; Ramesh, R.; Pan, X. Q.; Trolier-McKinstry, S.; Schlom, D. G.; Rzchowski, M. S.; Blick, R. H.; Eom, C. B.

    2011-11-01

    Microelectromechanical systems (MEMS) incorporating active piezoelectric layers offer integrated actuation, sensing, and transduction. The broad implementation of such active MEMS has long been constrained by the inability to integrate materials with giant piezoelectric response, such as Pb(Mg1/3Nb2/3)O3-PbTiO3 (PMN-PT). We synthesized high-quality PMN-PT epitaxial thin films on vicinal (001) Si wafers with the use of an epitaxial (001) SrTiO3 template layer with superior piezoelectric coefficients (e31,f = -27 ± 3 coulombs per square meter) and figures of merit for piezoelectric energy-harvesting systems. We have incorporated these heterostructures into microcantilevers that are actuated with extremely low drive voltage due to thin-film piezoelectric properties that rival bulk PMN-PT single crystals. These epitaxial heterostructures exhibit very large electromechanical coupling for ultrasound medical imaging, microfluidic control, mechanical sensing, and energy harvesting.

  16. Image Registration for Stability Testing of MEMS

    Science.gov (United States)

    Memarsadeghi, Nargess; LeMoigne, Jacqueline; Blake, Peter N.; Morey, Peter A.; Landsman, Wayne B.; Chambers, Victor J.; Moseley, Samuel H.

    2011-01-01

    Image registration, or alignment of two or more images covering the same scenes or objects, is of great interest in many disciplines such as remote sensing, medical imaging. astronomy, and computer vision. In this paper, we introduce a new application of image registration algorithms. We demonstrate how through a wavelet based image registration algorithm, engineers can evaluate stability of Micro-Electro-Mechanical Systems (MEMS). In particular, we applied image registration algorithms to assess alignment stability of the MicroShutters Subsystem (MSS) of the Near Infrared Spectrograph (NIRSpec) instrument of the James Webb Space Telescope (JWST). This work introduces a new methodology for evaluating stability of MEMS devices to engineers as well as a new application of image registration algorithms to computer scientists.

  17. MEMS Gyroscopes Based on Acoustic Sagnac Effect

    Directory of Open Access Journals (Sweden)

    Yuanyuan Yu

    2016-12-01

    Full Text Available This paper reports on the design, fabrication and preliminary test results of a novel microelectromechanical systems (MEMS device—the acoustic gyroscope. The unique operating mechanism is based on the “acoustic version” of the Sagnac effect in fiber-optic gyros. The device measures the phase difference between two sound waves traveling in opposite directions, and correlates the signal to the angular velocity of the hosting frame. As sound travels significantly slower than light and develops a larger phase change within the same path length, the acoustic gyro can potentially outperform fiber-optic gyros in sensitivity and form factor. It also promises superior stability compared to vibratory MEMS gyros as the design contains no moving parts and is largely insensitive to mechanical stress or temperature. We have carried out systematic simulations and experiments, and developed a series of processes and design rules to implement the device.

  18. Giant piezoelectricity on Si for hyperactive MEMS.

    Science.gov (United States)

    Baek, S H; Park, J; Kim, D M; Aksyuk, V A; Das, R R; Bu, S D; Felker, D A; Lettieri, J; Vaithyanathan, V; Bharadwaja, S S N; Bassiri-Gharb, N; Chen, Y B; Sun, H P; Folkman, C M; Jang, H W; Kreft, D J; Streiffer, S K; Ramesh, R; Pan, X Q; Trolier-McKinstry, S; Schlom, D G; Rzchowski, M S; Blick, R H; Eom, C B

    2011-11-18

    Microelectromechanical systems (MEMS) incorporating active piezoelectric layers offer integrated actuation, sensing, and transduction. The broad implementation of such active MEMS has long been constrained by the inability to integrate materials with giant piezoelectric response, such as Pb(Mg(1/3)Nb(2/3))O(3)-PbTiO(3) (PMN-PT). We synthesized high-quality PMN-PT epitaxial thin films on vicinal (001) Si wafers with the use of an epitaxial (001) SrTiO(3) template layer with superior piezoelectric coefficients (e(31,f) = -27 ± 3 coulombs per square meter) and figures of merit for piezoelectric energy-harvesting systems. We have incorporated these heterostructures into microcantilevers that are actuated with extremely low drive voltage due to thin-film piezoelectric properties that rival bulk PMN-PT single crystals. These epitaxial heterostructures exhibit very large electromechanical coupling for ultrasound medical imaging, microfluidic control, mechanical sensing, and energy harvesting.

  19. Cell Culture on MEMS Platforms: A Review

    Science.gov (United States)

    Ni, Ming; Tong, Wen Hao; Choudhury, Deepak; Rahim, Nur Aida Abdul; Iliescu, Ciprian; Yu, Hanry

    2009-01-01

    Microfabricated systems provide an excellent platform for the culture of cells, and are an extremely useful tool for the investigation of cellular responses to various stimuli. Advantages offered over traditional methods include cost-effectiveness, controllability, low volume, high resolution, and sensitivity. Both biocompatible and bio-incompatible materials have been developed for use in these applications. Biocompatible materials such as PMMA or PLGA can be used directly for cell culture. However, for bio-incompatible materials such as silicon or PDMS, additional steps need to be taken to render these materials more suitable for cell adhesion and maintenance. This review describes multiple surface modification strategies to improve the biocompatibility of MEMS materials. Basic concepts of cell-biomaterial interactions, such as protein adsorption and cell adhesion are covered. Finally, the applications of these MEMS materials in Tissue Engineering are presented. PMID:20054478

  20. Active mems microbeam device for gas detection

    KAUST Repository

    Bouchaala, Adam M.

    2017-10-05

    Sensors and active switches for applications in gas detection and other fields are described. The devices are based on the softening and hardening nonlinear response behaviors of microelectromechanical systems (MEMS) clamped-clamped microbeams. In that context, embodiments of gas-triggered MEMS microbeam sensors and switches are described. The microbeam devices can be coated with a Metal-Organic Framework to achieve high sensitivity. For gas sensing, an amplitude-based tracking algorithm can be used to quantify an amount of gas captured by the devices according to frequency shift. Noise analysis is also conducted according to the embodiments, which shows that the microbeam devices have high stability against thermal noise. The microbeam devices are also suitable for the generation of binary sensing information for alarming, for example.

  1. Characterization of a tooth microphone coupled to an oral appliance device: A new system for monitoring OSA patients.

    Science.gov (United States)

    Castillo, Yolanda; Blanco-Almazan, Dolores; Whitney, James; Mersky, Barry; Jane, Raimon

    2017-07-01

    Obstructive sleep apnea (OSA) is a highly prevalent chronic disease, especially in elderly and obese populations. Despite constituting a serious health, social and economic problem, most patients remain undiagnosed and untreated due to limitations in current equipment. In this work, we propose a novel method to diagnose OSA and monitor therapy adherence and effectiveness at home in a non-invasive and inexpensive way: combining acoustic analysis of breathing and snoring sounds with oral appliance therapy (OA). Audiodontics has introduced a new sensor, a tooth microphone coupled to an OA device, which is the main pillar of this system. The objective of this work is to characterize the response of this sensor, comparing it with a commercial tracheal microphone (Biopac transducer). Signals containing OSA-related sounds were acquired simultaneously with the two microphones for that purpose. They were processed and analyzed in time, frequency and time-frequency domains, in a custom MATLAB interface. We carried out a single-event approach focused on breaths, snores and apnea episodes. We found that the quality of the signals obtained by both microphones was quite similar, although the tooth microphone spectrum concentrated more energy at the high-frequency band. This opens a new field of study about high-frequency components of snores and breathing sounds. These characteristics, together with its intraoral position, wireless option and combination with customizable OAs, give the tooth microphone a great potential to reduce the impact of sleep disorders, by enabling prompt detection and continuous monitoring of patients at home.

  2. Optimization of Fixed Microphone Array in High Speed Train Noises Identification Based on Far-Field Acoustic Holography

    Directory of Open Access Journals (Sweden)

    Rujia Wang

    2017-01-01

    Full Text Available Acoustical holography has been widely applied for noise sources location and sound field measurement. Performance of the microphones array directly determines the sound source recognition method. Therefore, research is very important to the performance of the microphone array, its array of applications, selection, and how to design instructive. In this paper, based on acoustic holography moving sound source identification theory, the optimization method is applied in design of the microphone array, we select the main side lobe ratio and the main lobe area as the optimization objective function and then put the optimization method use in the sound source identification based on holography, and finally we designed this paper to optimize microphone array and compare the original array of equally spaced array with optimization results; by analyzing the optimization results and objectives, we get that the array can be achieved which is optimized not only to reduce the microphone but also to change objective function results, while improving the far-field acoustic holography resolving effect. Validation experiments have showed that the optimization method is suitable for high speed trains sound source identification microphone array optimization.

  3. Multiresolution Source/Filter Model for Low Bitrate Coding of Spot Microphone Signals

    Directory of Open Access Journals (Sweden)

    Panagiotis Tsakalides

    2008-04-01

    Full Text Available A multiresolution source/filter model for coding of audio source signals (spot recordings is proposed. Spot recordings are a subset of the multimicrophone recordings of a music performance, before the mixing process is applied for producing the final multichannel audio mix. The technique enables low bitrate coding of spot signals with good audio quality (above 3.0 perceptual grade compared to the original. It is demonstrated that this particular model separates the various microphone recordings of a multimicrophone recording into a part that mainly characterizes a specific microphone signal and a part that is common to all signals of the same recording (and can thus be omitted during transmission. Our interest in low bitrate coding of spot recordings is related to applications such as remote mixing and real-time collaboration of musicians who are geographically distributed. Using the proposed approach, it is shown that it is possible to encode a multimicrophone audio recording using a single audio channel only, with additional information for each spot microphone signal in the order of 5 kbps, for good-quality resynthesis. This is verified by employing both objective and subjective measures of performance.

  4. Multiresolution Source/Filter Model for Low Bitrate Coding of Spot Microphone Signals

    Directory of Open Access Journals (Sweden)

    Mouchtaris Athanasios

    2008-01-01

    Full Text Available A multiresolution source/filter model for coding of audio source signals (spot recordings is proposed. Spot recordings are a subset of the multimicrophone recordings of a music performance, before the mixing process is applied for producing the final multichannel audio mix. The technique enables low bitrate coding of spot signals with good audio quality (above 3.0 perceptual grade compared to the original. It is demonstrated that this particular model separates the various microphone recordings of a multimicrophone recording into a part that mainly characterizes a specific microphone signal and a part that is common to all signals of the same recording (and can thus be omitted during transmission. Our interest in low bitrate coding of spot recordings is related to applications such as remote mixing and real-time collaboration of musicians who are geographically distributed. Using the proposed approach, it is shown that it is possible to encode a multimicrophone audio recording using a single audio channel only, with additional information for each spot microphone signal in the order of 5 kbps, for good-quality resynthesis. This is verified by employing both objective and subjective measures of performance.

  5. Mitigating Wind Induced Noise in Outdoor Microphone Signals Using a Singular Spectral Subspace Method

    Directory of Open Access Journals (Sweden)

    Omar Eldwaik

    2018-01-01

    Full Text Available Wind induced noise is one of the major concerns of outdoor acoustic signal acquisition. It affects many field measurement and audio recording scenarios. Filtering such noise is known to be difficult due to its broadband and time varying nature. In this paper, a new method to mitigate wind induced noise in microphone signals is developed. Instead of applying filtering techniques, wind induced noise is statistically separated from wanted signals in a singular spectral subspace. The paper is presented in the context of handling microphone signals acquired outdoor for acoustic sensing and environmental noise monitoring or soundscapes sampling. The method includes two complementary stages, namely decomposition and reconstruction. The first stage decomposes mixed signals in eigen-subspaces, selects and groups the principal components according to their contributions to wind noise and wanted signals in the singular spectrum domain. The second stage reconstructs the signals in the time domain, resulting in the separation of wind noise and wanted signals. Results show that microphone wind noise is separable in the singular spectrum domain evidenced by the weighted correlation. The new method might be generalized to other outdoor sound acquisition applications.

  6. Finite element computation of elliptical vocal tract impedances using the two-microphone transfer function method.

    Science.gov (United States)

    Arnela, Marc; Guasch, Oriol

    2013-06-01

    A two-microphone transfer function (TMTF) method is adapted to a numerical framework to compute the radiation and input impedances of three-dimensional vocal tracts of elliptical cross-section. In its simplest version, the TMTF method only requires measuring the acoustic pressure at two points in an impedance duct and the postprocessing of the corresponding transfer function. However, some considerations are to be taken into account when using the TMTF method in the numerical context, which constitute the main objective of this paper. In particular, the importance of including absorption at the impedance duct walls to avoid lengthy numerical simulations is discussed and analytical complex axial wave numbers for elliptical ducts are derived for this purpose. It is also shown how the direct impedance of plane wave propagation can be computed beyond the TMTF maximum threshold frequency by appropriate location of the virtual microphones. Virtual microphone spacing is also discussed on the basis of the so-called singularity factor. Numerical examples include the computation of the radiation impedance of vowels /a/, /i/, and /u/ and the input impedance of vowel /a/, for simplified vocal tracts of circular and elliptical cross-sections.

  7. Identification of impact force acting on composite laminated plates using the radiated sound measured with microphones

    Science.gov (United States)

    Atobe, Satoshi; Nonami, Shunsuke; Hu, Ning; Fukunaga, Hisao

    2017-09-01

    Foreign object impact events are serious threats to composite laminates because impact damage leads to significant degradation of the mechanical properties of the structure. Identification of the location and force history of the impact that was applied to the structure can provide useful information for assessing the structural integrity. This study proposes a method for identifying impact forces acting on CFRP (carbon fiber reinforced plastic) laminated plates on the basis of the sound radiated from the impacted structure. Identification of the impact location and force history is performed using the sound pressure measured with microphones. To devise a method for identifying the impact location from the difference in the arrival times of the sound wave detected with the microphones, the propagation path of the sound wave from the impacted point to the sensor is examined. For the identification of the force history, an experimentally constructed transfer matrix is employed to relate the force history to the corresponding sound pressure. To verify the validity of the proposed method, impact tests are conducted by using a CFRP cross-ply laminate as the specimen, and an impulse hammer as the impactor. The experimental results confirm the validity of the present method for identifying the impact location from the arrival time of the sound wave detected with the microphones. Moreover, the results of force history identification show the feasibility of identifying the force history accurately from the measured sound pressure using the experimental transfer matrix.

  8. Comparison of Computational and Experimental Microphone Array Results for an 18%-Scale Aircraft Model

    Science.gov (United States)

    Lockard, David P.; Humphreys, William M.; Khorrami, Mehdi R.; Fares, Ehab; Casalino, Damiano; Ravetta, Patricio A.

    2015-01-01

    An 18%-scale, semi-span model is used as a platform for examining the efficacy of microphone array processing using synthetic data from numerical simulations. Two hybrid RANS/LES codes coupled with Ffowcs Williams-Hawkings solvers are used to calculate 97 microphone signals at the locations of an array employed in the NASA LaRC 14x22 tunnel. Conventional, DAMAS, and CLEAN-SC array processing is applied in an identical fashion to the experimental and computational results for three different configurations involving deploying and retracting the main landing gear and a part span flap. Despite the short time records of the numerical signals, the beamform maps are able to isolate the noise sources, and the appearance of the DAMAS synthetic array maps is generally better than those from the experimental data. The experimental CLEAN-SC maps are similar in quality to those from the simulations indicating that CLEAN-SC may have less sensitivity to background noise. The spectrum obtained from DAMAS processing of synthetic array data is nearly identical to the spectrum of the center microphone of the array, indicating that for this problem array processing of synthetic data does not improve spectral comparisons with experiment. However, the beamform maps do provide an additional means of comparison that can reveal differences that cannot be ascertained from spectra alone.

  9. Speech Recognition for Environmental Control: Effect of Microphone Type, Dysarthria, and Severity on Recognition Results.

    Science.gov (United States)

    Fager, Susan Koch; Burnfield, Judith M

    2015-01-01

    This study examines the use of commercially available automatic speech recognition (ASR) across microphone options as access to environmental control for individuals with and without dysarthria. A study of two groups of speakers (typical speech and dysarthria), was conducted to understand their performance using ASR and various microphones for environmental control. Specifically, dependent variables examined included attempts per command, recognition accuracy, frequency of error type, and perceived workload. A further sub-analysis of the group of participants with dysarthria examined the impact of severity. Results indicated a significantly larger number of attempts were required (P = 0.007), and significantly lower recognition accuracies were achieved by the dysarthric participants (P = 0.010). A sub-analysis examining severity demonstrated no significant differences between the typical speakers and participants with mild dysarthria. However, significant differences were evident (P = 0.007, P = 0.008) between mild and moderate-severe dysarthric participants. No significant differences existed across microphones. A higher frequency of threshold errors occurred for typical participants and no response errors for moderate-severe dysarthrics. There were no significant differences on the NASA Task Load Index.

  10. Negative Capacitance Field Effect Transistors; Capacitance Matching and non-Hysteretic Operation

    OpenAIRE

    Saeidi, Ali; Jazaeri, Farzan; Bellando, Francesco; Stolichnov, Igor; Enz, Christian; Ionescu, Mihai Adrian

    2017-01-01

    This work experimentally demonstrates negative capacitance MOSFETs in hysteretic and non-hysteretic modes of operation. A PZT capacitor is externally connected to the gate of commercial nMOSFETs fabricated in 28nm CMOS technology to explore the negative capacitance effect. In hysteretic devices, subthreshold slope as steep as 10mV/dec is achieved in the region where the ferroelectric represents an S-shape polarization. In addition, a matching condition is achieved between a PZT capacitor and ...

  11. Investigating ESD sensitivity in electrostatic SiGe MEMS

    International Nuclear Information System (INIS)

    Sangameswaran, Sandeep; De Coster, Jeroen; Linten, Dimitri; Scholz, Mirko; Thijs, Steven; Groeseneken, Guido; De Wolf, Ingrid

    2010-01-01

    The sensitivity of electrostatically actuated SiGe microelectromechanical systems to electrostatic discharge events has been investigated in this paper. Torsional micromirrors and RF microelectromechanical systems (MEMS) actuators have been used as two case studies to perform this study. On-wafer electrostatic discharge (ESD) measurement methods, such as the human body model (HBM) and machine model (MM), are discussed. The impact of HBM ESD zap tests on the functionality and behavior of MEMS is explained and the ESD failure levels of MEMS have been verified by failure analysis. It is demonstrated that electrostatic MEMS devices have a high sensitivity to ESD and that it is essential to protect them.

  12. Capacitive Bioanodes Enable Renewable Energy Storage in Microbial Fuel Cells

    NARCIS (Netherlands)

    Deeke, A.; Sleutels, T.H.J.A.; Hamelers, H.V.M.; Buisman, C.J.N.

    2012-01-01

    We developed an integrated system for storage of renewable electricity in a microbial fuel cell (MFC). The system contained a capacitive electrode that was inserted into the anodic compartment of an MFC to form a capacitive bioanode. This capacitive bioanode was compared with a noncapacitive

  13. Capacitated Vehicle Routing with Non-Uniform Speeds

    DEFF Research Database (Denmark)

    Gørtz, Inge Li; Molinaro, Marco; Nagarajan, Viswanath

    2016-01-01

    The capacitated vehicle routing problem (CVRP) involves distributing identical items from a depot to a set of demand locations using a single capacitated vehicle. We introduce the heterogeneous capacitated vehicle routing problem, a generalization of CVRP to the setting of multiple vehicles havin...

  14. Quantum capacitance of the armchair-edge graphene nanoribbon

    Indian Academy of Sciences (India)

    Home; Journals; Pramana – Journal of Physics; Volume 81; Issue 2. Quantum capacitance of the ... Abstract. The quantum capacitance, an important parameter in the design of nanoscale devices, is derived for armchair-edge single-layer graphene nanoribbon with semiconducting property. The quantum capacitance ...

  15. Quantum capacitance of the armchair-edge graphene nanoribbon

    Indian Academy of Sciences (India)

    Abstract. The quantum capacitance, an important parameter in the design of nanoscale devices, is derived for armchair-edge single-layer graphene nanoribbon with semiconducting property. The quantum capacitance oscillations are found and these capacitance oscillations originate from the lateral quantum confinement ...

  16. Review on the Modeling of Electrostatic MEMS

    Directory of Open Access Journals (Sweden)

    Wan-Chun Chuang

    2010-06-01

    Full Text Available Electrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduces the physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices.

  17. Different grades MEMS accelerometers error characteristics

    Science.gov (United States)

    Pachwicewicz, M.; Weremczuk, J.

    2017-08-01

    The paper presents calibration effects of two different MEMS accelerometers of different price and quality grades and discusses different accelerometers errors types. The calibration for error determining is provided by reference centrifugal measurements. The design and measurement errors of the centrifuge are discussed as well. It is shown that error characteristics of the sensors are very different and it is not possible to use simple calibration methods presented in the literature in both cases.

  18. Ultra-compact MEMS FTIR spectrometer

    Science.gov (United States)

    Sabry, Yasser M.; Hassan, Khaled; Anwar, Momen; Alharon, Mohamed H.; Medhat, Mostafa; Adib, George A.; Dumont, Rich; Saadany, Bassam; Khalil, Diaa

    2017-05-01

    Portable and handheld spectrometers are being developed and commercialized in the late few years leveraging the rapidly-progressing technology and triggering new markets in the field of on-site spectroscopic analysis. Although handheld devices were commercialized for the near-infrared spectroscopy (NIRS), their size and cost stand as an obstacle against the deployment of the spectrometer as spectral sensing components needed for the smart phone industry and the IoT applications. In this work we report a chip-sized microelectromechanical system (MEMS)-based FTIR spectrometer. The core optical engine of the solution is built using a passive-alignment integration technique for a selfaligned MEMS chip; self-aligned microoptics and a single detector in a tiny package sized about 1 cm3. The MEMS chip is a monolithic, high-throughput scanning Michelson interferometer fabricated using deep reactive ion etching technology of silicon-on-insulator substrate. The micro-optical part is used for conditioning the input/output light to/from the MEMS and for further light direction to the detector. Thanks to the all-reflective design of the conditioning microoptics, the performance is free of chromatic aberration. Complemented by the excellent transmission properties of the silicon in the infrared region, the integrated solution allows very wide spectral range of operation. The reported sensor's spectral resolution is about 33 cm-1 and working in the range of 1270 nm to 2700 nm; upper limited by the extended InGaAs detector. The presented solution provides a low cost, low power, tiny size, wide wavelength range NIR spectral sensor that can be manufactured with extremely high volumes. All these features promise the compatibility of this technology with the forthcoming demand of smart portable and IoT devices.

  19. Thermoelectrical Generator for a MEMS-Fuze

    OpenAIRE

    A. K. Efremov; K. V. Vlasov

    2015-01-01

    The structure of modern fuzes includes micro-electromechanical systems (MEMS), which have such advanced devices as micro-accelerometers and micro-switches, being triggered at a specified level of setback. Independent power source (PS), as an inherent part of the MEMSfuze, charges an energy storage unit during the shot and triggers the fuze firing circuit when the shell encounters the target. Operating level of the control signal should be achieved within the time of remote arming, determined ...

  20. Movable MEMS Devices on Flexible Silicon

    KAUST Repository

    Ahmed, Sally

    2013-05-05

    Flexible electronics have gained great attention recently. Applications such as flexible displays, artificial skin and health monitoring devices are a few examples of this technology. Looking closely at the components of these devices, although MEMS actuators and sensors can play critical role to extend the application areas of flexible electronics, fabricating movable MEMS devices on flexible substrates is highly challenging. Therefore, this thesis reports a process for fabricating free standing and movable MEMS devices on flexible silicon substrates; MEMS flexure thermal actuators have been fabricated to illustrate the viability of the process. Flexure thermal actuators consist of two arms: a thin hot arm and a wide cold arm separated by a small air gap; the arms are anchored to the substrate from one end and connected to each other from the other end. The actuator design has been modified by adding etch holes in the anchors to suit the process of releasing a thin layer of silicon from the bulk silicon substrate. Selecting materials that are compatible with the release process was challenging. Moreover, difficulties were faced in the fabrication process development; for example, the structural layer of the devices was partially etched during silicon release although it was protected by aluminum oxide which is not attacked by the releasing gas . Furthermore, the thin arm of the thermal actuator was thinned during the fabrication process but optimizing the patterning and etching steps of the structural layer successfully solved this problem. Simulation was carried out to compare the performance of the original and the modified designs for the thermal actuators and to study stress and temperature distribution across a device. A fabricated thermal actuator with a 250 μm long hot arm and a 225 μm long cold arm separated by a 3 μm gap produced a deflection of 3 μm before silicon release, however, the fabrication process must be optimized to obtain fully functioning

  1. Fractal Structures For Fixed Mems Capacitors

    KAUST Repository

    Elshurafa, Amro M.

    2014-08-28

    An embodiment of a fractal fixed capacitor comprises a capacitor body in a microelectromechanical system (MEMS) structure. The capacitor body has a first plate with a fractal shape separated by a horizontal distance from a second plate with a fractal shape. The first plate and the second plate are within the same plane. Such a fractal fixed capacitor further comprises a substrate above which the capacitor body is positioned.

  2. On the Stiction of MEMS Materials

    DEFF Research Database (Denmark)

    Zhuang, Yanxin; Menon, Aric Kumaran

    2005-01-01

    energies and stiction of commonly used MEMS materials by contact angle measurements and atomic force microscopy (AFM). Dispersive and polar components of surface energies are calculated by Owens-Wendt-Rabel-Kaelble method. Silicon and silicon-related materials have higher polar surface energies than SU-8...... been shown that the materials with higher surface energy have higher sticton/adhesion forces. The topography of surface influences the contact angle and stiction, and is also discussed in the paper....

  3. Solid polymer MEMS-based fuel cells

    Science.gov (United States)

    Jankowski, Alan F [Livermore, CA; Morse, Jeffrey D [Pleasant Hill, CA

    2008-04-22

    A micro-electro-mechanical systems (MEMS) based thin-film fuel cells for electrical power applications. The MEMS-based fuel cell may be of a solid oxide type (SOFC), a solid polymer type (SPFC), or a proton exchange membrane type (PEMFC), and each fuel cell basically consists of an anode and a cathode separated by an electrolyte layer. The electrolyte layer can consist of either a solid oxide or solid polymer material, or proton exchange membrane electrolyte materials may be used. Additionally catalyst layers can also separate the electrodes (cathode and anode) from the electrolyte. Gas manifolds are utilized to transport the fuel and oxidant to each cell and provide a path for exhaust gases. The electrical current generated from each cell is drawn away with an interconnect and support structure integrated with the gas manifold. The fuel cells utilize integrated resistive heaters for efficient heating of the materials. By combining MEMS technology with thin-film deposition technology, thin-film fuel cells having microflow channels and full-integrated circuitry can be produced that will lower the operating temperature an will yield an order of magnitude greater power density than the currently known fuel cells.

  4. The challenge of reliability in MEMS commercialization

    Energy Technology Data Exchange (ETDEWEB)

    Miller, W.M.; Tanner, D.M.; Miller, S.L.

    1998-09-01

    MicroElectroMechanical Systems (MEMS) that think, sense, act and communicate will open up a broad new array of cost-effective solutions only if MEMS is demonstrated to be sufficiently reliable. This could prove to be a major challenge if it is not addressed concurrently with technology development. There are three requirements for a valid assessment of reliability: statistical significance, identification of fundamental failure mechanisms and development of techniques for accelerating them, and valid physical models to allow prediction of failures during actual use. While these already exist for the microelectronics portion of such integrated systems, the real challenge lies in the less well-understood micromachine portions and its synergistic effects with microelectronics. This requires the elicitation of a methodology focused on MEMS reliability, which the authors discuss. A new testing and analysis infrastructure must also be developed to meet the needs of this methodology. They describe their implementation of this infrastructure and its success in addressing the three requirements for a valid reliability assessment.

  5. An Opto-MEMS Multiobject Spectrograph

    Science.gov (United States)

    Kearney, K.; Ninkov, Z.; Zwarg, D.

    2000-05-01

    Optical MEMS (Micro-Electro-Mechanical-Structures) are an enabling technology for a new class of optical instrumentation designs. An opto-MEMS device consists of an array of microfabricated structures, each of which modulates the phase and/or amplitude of an incident light beam. Typically the devices consist of an array of moveable micromirrors - each of which reflects an incident beam in a unique direction (tilt), or with a unique phase shift (piston). One widely available opto-MEMS device is the Texas Instruments' Digital Micromirror Device (DMD). The DMD is an array of 16 micron x 16 micron square mirrors postioned on a 17 micron pitch. Each mirror can tilt +/- 10 degrees from the normal - reflecting a normally incident light beam +/- 20 degrees. By positioning the DMD in an intermediate image plane in an optical system, portions of the image can be directed into- or out-of the input pupil of the follow-on imaging optics. RIT is utilizing the DMD to construct a prototype multiobject spectrograph (RIT-MOS) for visible observations with terrestrial telescopes. The DMD array replaces the input slit of an imaging spectrograph, forming a 'virtual', programmable slit assembly. By acquiring a pre-image of the astronomical field, it is possible to select a multidude of objects, and to program the DMD to pass only those objects into the input optics of the imaging spectrograph. We will report on the design and characterizatotion of the RIT-MOS, as well as preliminary imaging results.

  6. Heterogeneous MEMS device assembly and integration

    Science.gov (United States)

    Topart, Patrice; Picard, Francis; Ilias, Samir; Alain, Christine; Chevalier, Claude; Fisette, Bruno; Paultre, Jacques E.; Généreux, Francis; Legros, Mathieu; Lepage, Jean-François; Laverdière, Christian; Ngo Phong, Linh; Caron, Jean-Sol; Desroches, Yan

    2014-03-01

    In recent years, smart phone applications have both raised the pressure for cost and time to market reduction, and the need for high performance MEMS devices. This trend has led the MEMS community to develop multi-die packaging of different functionalities or multi-technology (i.e. wafer) approaches to fabricate and assemble devices respectively. This paper reports on the fabrication, assembly and packaging at INO of various MEMS devices using heterogeneous assembly at chip and package-level. First, the performance of a giant (e.g. about 3 mm in diameter), electrostatically actuated beam steering mirror is presented. It can be rotated about two perpendicular axes to steer an optical beam within an angular cone of up to 60° in vector scan mode with an angular resolution of 1 mrad and a response time of 300 ms. To achieve such angular performance relative to mirror size, the microassembly was performed from sub-components fabricated from 4 different wafers. To combine infrared detection with inertial sensing, an electroplated proof mass was flip-chipped onto a 256×1 pixel uncooled bolometric FPA and released using laser ablation. In addition to the microassembly technology, performance results of packaged devices are presented. Finally, to simulate a 3072×3 pixel uncooled detector for cloud and fire imaging in mid and long-wave IR, the staggered assembly of six 512×3 pixel FPAs with a less than 50 micron pixel co-registration is reported.

  7. A nuclear micro battery for Mems devices

    International Nuclear Information System (INIS)

    Lal, A.; Bilbao Y Leon, R.M.; Guo, H.; Li, H.; Santanam, S.; Yao, R.; Blanchard, J.; Henderson, D.

    2001-01-01

    Micro-electromechanical Systems (MEMS) have not gained wide use because they lack the on-device power required by many important applications. Several forms of energy could be considered to supply this needed power (solar, fossil fuels, etc), but nuclear sources provide an intriguing option in terms of power density and lifetime. This paper describes several approaches for establishing the viability of nuclear sources for powering realistic MEMS devices. Isotopes currently being used include alpha and low-energy beta emitters. The sources are in both solid and liquid form, and a technique for plating a solid source from a liquid source has been investigated. Several approaches are being explored for the production of MEMS power sources. The first concept is a junction-type battery. The second concept involves a more direct use of the charged particles produced by the decay: the creation of a resonator by inducing movement due to attraction or repulsion resulting from the collection of charged particles. Performance results are provided for each of these concepts. (authors)

  8. MEMS and the direct detection of exoplanets

    Science.gov (United States)

    Thomas, Sandrine J.; Macintosh, Bruce; Belikov, Ruslan

    2014-03-01

    Deformable mirrors, and particularly MEMS, are crucial components for the direct imaging of exoplanets for both ground-based and space-based instruments. Without deformable mirrors, coronagraphs are incapable of reaching contrasts required to image Jupiter-like planets. The system performance is limited by image quality degradation resulting from wavefront error introduced from multiple effects including: atmospheric turbulence, static aberrations in the system, non-common-path aberrations, all of which vary with time. Correcting for these effects requires a deformable mirror with fast response and numerous actuators having moderate stroke. Not only do MEMS devices fulfill this requirement but their compactness permits their application in numerous space- and ground-based instruments, which are often volume- and mass-limited. In this paper, I will briefly explain how coronagraphs work and their requirements. I then will discuss the Extreme Adaptive Optics needed to compensate for the introduced wavefront error and how MEMS devices are a good choice to achieve the performance needed to produce the contrasts necessary to detect exoplanets. As examples, I will discuss a facility instrument for the Gemini Observatory, called the Gemini Planet Imager, that will detect Jupiter-like planets and present recent results from the NASA Ames Coronagraph Experiment laboratory, in the context of a proposed space- based mission called EXCEDE. EXCEDE is planned to focus on protoplanetary disks.

  9. MEMS Micro-Valve for Space Applications

    Science.gov (United States)

    Chakraborty, I.; Tang, W. C.; Bame, D. P.; Tang, T. K.

    1998-01-01

    We report on the development of a Micro-ElectroMechanical Systems (MEMS) valve that is designed to meet the rigorous performance requirements for a variety of space applications, such as micropropulsion, in-situ chemical analysis of other planets, or micro-fluidics experiments in micro-gravity. These systems often require very small yet reliable silicon valves with extremely low leak rates and long shelf lives. Also, they must survive the perils of space travel, which include unstoppable radiation, monumental shock and vibration forces, as well as extreme variations in temperature. Currently, no commercial MEMS valve meets these requirements. We at JPL are developing a piezoelectric MEMS valve that attempts to address the unique problem of space. We begin with proven configurations that may seem familiar. However, we have implemented some major design innovations that should produce a superior valve. The JPL micro-valve is expected to have an extremely low leak rate, limited susceptibility to particulates, vibration or radiation, as well as a wide operational temperature range.

  10. Cyclonic Capacitive Sensor for Multiphase Composition Measurement

    Directory of Open Access Journals (Sweden)

    Javier ORTIZ

    2015-08-01

    Full Text Available A Cyclonic Capacitive Sensor is proposed for real time multiphase composition measurement with a characteristic suitable for offshore installations. The sensor makes a novel use of an electrostatic technique that takes advantage of a non-linear distribution of phase-interfaces in a cyclonic multiphase flow stratifier. The novel sensor consists of a stack of ring electrodes confined into a cyclone-type phase stratifier. The capacitance detected at each ring electrode pair is a function of the phase volumetric fraction, the temperature and chemical composition dependent phase permittivities and the physical dimensions of the ring electrodes. If the number of electrodes is made proportional to the number of unknown parameters, a complete set of linearly independent equations can be established to resolve the desired parameters, mainly the composition. The robustness of such sensor can be improved by adding a redundant electrode pair. Analytical, numerical and experimental analyses are presented.

  11. The resolution limit of scanning capacitance microscopes

    CERN Document Server

    Lany, S

    2003-01-01

    The contrast formation and the achievable lateral resolution of a scanning capacitance microscope have been simulated using the finite element method. On conducting surfaces, a resolution of about 2 nm is expected with probes with about 5-10 nm radius of curvature. At smaller radii, the resolution degrades due to the decrease of the local contribution to the integral capacitance sensed by the probe. The lateral resolution is less affected by the radius of the tip than by the tip-to-conducting base distance, though sharper tips produce higher contrast. With a tip radius of approximately 25 nm, resolution of features 5 nm in diameter has been achieved on gold-coated silicon.

  12. Locating Depots for Capacitated Vehicle Routing

    DEFF Research Database (Denmark)

    Gørtz, Inge Li; Nagarajan, Viswanath

    2016-01-01

    depots, one for each vehicle, and compute routes for the vehicles so that all demands are satisfied and the total cost is minimized. Our main result is a constant-factor approximation algorithm for k-LocVRP. In obtaining this result, we introduce a common generalization of the k-median and minimum...... spanning tree problems (called k median forest), which might be of independent interest. We give a local-search based (3+ε)-approximation algorithm for k median forest, which leads to a (12+ε)-approximation algorithm for k-LocVRP, for any constant ε>0.......We study a location-routing problem in the context of capacitated vehicle routing. The input to the k-location capacitated vehicle routing problem (k-LocVRP) consists of a set of demand locations in a metric space and a fleet of k identical vehicles, each of capacity Q. The objective is to locate k...

  13. A Versatile Prototyping System for Capacitive Sensing

    Directory of Open Access Journals (Sweden)

    Daniel HRACH

    2008-04-01

    Full Text Available This paper presents a multi-purpose and easy to handle rapid prototyping platform that has been designed for capacitive measurement systems. The core of the prototype platform is a Digital Signal Processor board that allows for the entire data acquisition, data (pre- processing and storage, and communication with any host computer. The platform is running on uCLinux operating system and features the possibility of a fast design and evaluation of capacitive sensor developments. To show the practical benefit of the prototyping platform, three exemplary applications are presented. For all applications, the platform is just plugged to the electrode structure of the sensor front-end without the need for analogue signal pre-conditioning.

  14. Compressed magnetic flux amplifier with capacitive load

    International Nuclear Information System (INIS)

    Stuetzer, O.M.

    1980-03-01

    A first-order analysis is presented for a compressed magnetic flux (CMF) current amplifier working into a load with a capacitive component. Since the purpose of the investigation was to gain a general understanding of the arrangement, a number of approximations and limitations were accepted. The inductance of the transducer varies with time; the inductance/resistance/capacitance (LRC) circuit therefore is parametric and solutions are different for the stable regime (high C), the oscillation regime (low C), and the transition case. Solutions and performance depend strongly on circuit boundary conditions, i.e., energization of the circuit by either an injected current or by an applied capacitor charge. The behavior of current and energy amplification for the various cases are discussed in detail. A number of experiments with small CMF devices showed that the first-order theory presented predicts transducer performance well in the linear regime

  15. Implementation of Hybrid Speech Dereverberation Systems and Proposing Dual Microphone Farsi Database in Order to Evaluating Enhancement Systems

    Directory of Open Access Journals (Sweden)

    Farhad Faghani

    2013-01-01

    Full Text Available In various applications, such as speech recognition and automatic teleconferencing, the recorded speech signals may be corrupted by both noise and reverberation. Reverberation causes a noticeable change in speech intelligibility and quality. In this research, firstly reverberation is described. There are some de-reverberation enhancement algorithms that use only one microphone. They mostly use inverse filtering and spectral subtraction as their sub-systems. On the other hand, there are many multi-microphone speech enhancement systems; Delay-and-sum beam former is the most famous amongst them. Moreover, several efficient approaches have been also reported that use linear prediction (LP residual signal, inverse filtering, and phase error. Despite the improvements and benefits gained by the use of several input microphones, considering the tradeoff between these gains and the complexity and computational cost forced by the use of more microphones, many researchers have focused on dual-microphones systems. So, a review on Microphone array signal processing is explained and then an arrangement for two microphones systems is proposed. As we want to evaluate these algorithms for Farsi speech signals, the problem of speech intelligibility assessment has been explained and a Farsi word list for Diagnostic Rhyme Test (DRT is presented.The structure of presented word list is similar to that of English DRT words. In this research, after a brief study of above-mentioned methods, we propose and implement some hybrid techniques to benefit from the advantages of several methods and achieve significant improvement in output signals. It will be shown that the proposed method performs superior to the state-of-the-art dereverberation algorithms.

  16. Capacitive level meter for liquid rare gases

    Science.gov (United States)

    Sawada, R.; Kikuchi, J.; Shibamura, E.; Yamashita, M.; Yoshimura, T.

    2003-08-01

    An international project to search μ→eγ decay includes the use of a liquid xenon gamma ray detector. So, a liquid level meter working at a low temperature with low outgassing is needed and the prototype is constructed. The meter shows the liquid level by measuring the capacitance between electrodes with small intervals immersed in the liquid. The operation was successful with the estimated precision of 1 mm in RMS or better.

  17. RF sputtering: A viable tool for MEMS fabrication

    Indian Academy of Sciences (India)

    In the present work, we report preparation of silicon dioxide, silicon nitride and piezoelec- tric ZnO films by RF sputtering process. The properties of these films relevant for MEMS applications have been evaluated. The application of these films in fabricating basic MEMS structures such as diaphragm, micro-cantilever beams ...

  18. Buffering Implications for the Design Space of Streaming MEMS Storage

    NARCIS (Netherlands)

    Khatib, M.G.; Abelmann, Leon; Preas, Kathy

    2011-01-01

    Emerging nanotechnology-based systems encounter new non-functional requirements. This work addresses MEMS storage, an emerging technology that promises ultrahigh density and energy-efficient storage devices. We study the buffering requirement of MEMS storage in streaming applications. We show that

  19. Shutdown Policies for MEMS-Based Storage Devices -- Analytical Models

    NARCIS (Netherlands)

    Khatib, M.G.; Engelen, Johannes Bernardus Charles; Hartel, Pieter H.

    MEMS-based storage devices should be energy ecient for deployment in mobile systems. Since MEMS-based storage devices have a moving me- dia sled, they should be shut down during periods of inactivity. However, shutdown costs energy, limiting the applicability of aggressive shutdown decisions. The

  20. Development and application of high-end aerospace MEMS

    Science.gov (United States)

    Yuan, Weizheng

    2017-12-01

    This paper introduces the design and manufacturing technology of aerospace microelectromechanical systems (MEMS) characterized by high performance, multi-variety, and small batch. Moreover, several kinds of special MEMS devices with high precision, high reliability, and environmental adaptability, as well as their typical applications in the fields of aeronautics and aerospace, are presented.